<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:g="http://www.iochem-bd.org/dictionary/gaussian/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="grrm.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module cmlx:templateRef="final-geometry"/>
         <module cmlx:templateRef="frequencies"/>
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar cmlx:templateRef="program.name" dataType="xsd:string">GRRM</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:integer">23</scalar>
               </parameter>
               <parameter dictRef="cc:programDate">
                  <scalar dataType="xsd:string">January 23, 2023</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:jobtype">
                  <scalar dataType="xsd:string">Saddle</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">wB97XD</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">def2svpp</scalar>
               </parameter>
               <parameter dictRef="cc:charge">
                  <scalar dataType="xsd:integer">0</scalar>
               </parameter>
               <parameter dictRef="cc:multiplicity">
                  <scalar dataType="xsd:integer">1</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">1</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37664836" y3="0.15437031" z3="-0.23119175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.4413592" y3="0.06541964" z3="0.31782302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71339829" y3="0.38373994" z3="-0.43456853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83611754" y3="1.27281535" z3="-2.35945116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44530395" y3="0.58967302" z3="-1.21911832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76035263" y3="0.9932381" z3="-3.67749292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77696918" y3="1.82968488" z3="-3.25013816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.5927784" y3="2.79323072" z3="-4.75418454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.61011426" y3="1.47040492" z3="-4.37652136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.74004388" y3="3.18287831" z3="-5.31871709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.83797976" y3="-0.33272332" z3="-3.38410695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12678099" y3="0.33507201" z3="-0.9906232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37995675" y3="-0.85521712" z3="-1.88692753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91725761" y3="-0.720069" z3="-1.66256732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10309404" y3="-2.16541431" z3="-1.69995919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.03095009" y3="-3.75625828" z3="0.74138031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.46145982" y3="-5.22285016" z3="-4.69502334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.1658582" y3="-5.02430602" z3="-3.66075769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.59280209" y3="-4.48565141" z3="-1.04835956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.10339538" y3="-4.50594938" z3="-2.76894152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.13912169" y3="-5.29832787" z3="-3.24734167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.5190204" y3="-5.03036875" z3="-1.93400277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.73585304" y3="-4.24550678" z3="-1.44645312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.12542103" y3="-4.2805772" z3="-3.08186571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.87072158" y3="-5.70135266" z3="-3.95048502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.54896969" y3="-5.21781203" z3="-1.62025746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.87614588" y3="-4.07860758" z3="0.26904516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.05497547" y3="-3.93948479" z3="0.8631672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.89395301" y3="-4.46258299" z3="0.39985195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11266341" y3="-3.77461112" z3="2.32442691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.27464528" y3="-3.53879606" z3="5.11282282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29521749" y3="-4.11102199" z3="2.99925782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01440515" y3="-3.31568466" z3="3.06770277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.09205355" y3="-3.19966536" z3="4.45219054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37374408" y3="-3.99721059" z3="4.3845989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.15731805" y3="-4.47245634" z3="2.4316122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.07050108" y3="-3.05522708" z3="2.58269271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.21306789" y3="-2.8595569" z3="5.00710632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29801956" y3="-4.27331942" z3="4.89956514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.33436611" y3="-3.45643627" z3="6.20169848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.56551351" y3="-3.76879575" z3="-0.51033293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.27383181" y3="-3.16944828" z3="-0.94150179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.40686956" y3="0.60789246" z3="-4.52264161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04230587" y3="-2.07790024" z3="-0.06626052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.03343437" y3="-1.33866794" z3="1.11391346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.05355048" y3="-0.62406788" z3="1.55952493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.72278186" y3="0.46765255" z3="1.30054817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.9431064" y3="1.38884818" z3="-0.30255781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.80582655" y3="-0.57381235" z3="1.46823678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.89400119" y3="1.60982671" z3="2.7757193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.08286628" y3="-1.42469558" z3="1.91980076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.03035751" y3="-0.79298973" z3="3.18879072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.53647522" y3="0.79819531" z3="-1.14111764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.36798155" y3="2.33189055" z3="-0.24538371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.00108316" y3="1.6478216" z3="-0.48659823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.90273339" y3="-0.89707037" z3="2.51819749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.70211265" y3="0.01165837" z3="1.19706518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79030696" y3="-1.44935438" z3="0.7995074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.88844776" y3="1.03944271" z3="3.7214629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.04688508" y3="2.31923369" z3="2.80663431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.82507493" y3="2.20234281" z3="2.73055395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.17889161" y3="-1.16216722" z3="3.78222441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.97421286" y3="-1.05417283" z3="3.68580122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.95543573" y3="0.30106368" z3="3.07549058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82746888" y3="-0.52230954" z3="0.98004623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.48160229" y3="-1.87782901" z3="0.92552935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79607569" y3="-2.47688602" z3="1.97586353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.47507845" y3="-1.70568312" z3="3.08843051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.86648669" y3="-0.37469721" z3="3.20270152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.54900186" y3="0.21037009" z3="2.14127919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.68293834" y3="-2.44350129" z3="0.01533514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.46420698" y3="-3.51379189" z3="1.91247948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.59453772" y3="-2.27814998" z3="4.11176642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.59603461" y3="0.19706787" z3="4.09107713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.82799318" y3="1.26630102" z3="2.19159588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83533778" y3="1.14053111" z3="-4.1436448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.97909737" y3="0.35494374" z3="-4.12184012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.87355816" y3="-0.9843058" z3="-4.48109483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.6669497" y3="-1.53761915" z3="-4.89708361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.46735196" y3="-0.73475604" z3="-4.92412797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.89521499" y3="2.17743489" z3="-3.80362234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93969084" y3="0.75573098" z3="-3.79697986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.05818468" y3="-1.84156987" z3="-4.364473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.6218633" y3="-2.59370422" z3="-5.16567554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.42189179" y3="-1.16926721" z3="-5.22256022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15470495" y3="-1.53153498" z3="4.9649612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31515009" y3="-3.45609233" z3="4.03036436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.96991402" y3="-2.99029762" z3="-4.74296017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.06032704" y3="-1.35705331" z3="-3.87736754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17915722" y3="0.98870975" z3="-1.63412792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23979813" y3="1.41836954" z3="-2.61666547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56987492" y3="1.14997713" z3="-1.8815286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01974122" y3="1.68751923" z3="-3.06244022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27947629" y3="0.82449234" z3="-1.11455251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.09221012" y3="1.80065049" z3="-3.24386857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73968454" y3="1.94815072" z3="-3.83911611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0903985" y3="2.0789177" z3="-4.05568926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03301446" y3="2.24367237" z3="-4.61779561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.45028174" y3="2.48214962" z3="-5.006489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.70260268" y3="3.22728003" z3="-3.57120496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.62723335" y3="3.69082195" z3="-4.38463999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.63368982" y3="4.18892389" z3="-3.08612015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.53819638" y3="5.51322148" z3="-3.44170524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.43373087" y3="3.86930947" z3="-2.41660597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.26765596" y3="6.23034227" z3="-3.05455853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.56427585" y3="5.06423785" z3="-4.74929688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.50262049" y3="5.95843473" z3="-4.29750658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.74112266" y3="5.39869454" z3="-5.38834238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.4428999" y3="7.0130073" z3="-4.58071624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.35861483" y3="-2.65941355" z3="-0.52749605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.18938512" y3="-3.41941881" z3="-1.30886532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.93121965" y3="-3.11325347" z3="0.29803529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99612208" y3="-1.88170054" z3="-0.98753012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.04853788" y3="-1.71369905" z3="-1.13630614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29528243" y3="-0.73582732" z3="-1.58693669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00291543" y3="-1.65315057" z3="-0.79601568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.06709327" y3="-2.45529158" z3="-1.94691793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3766,.1544,-.2312;7.4414,.0654,.3178;6.7134,.3837,-.4346;4.8361,1.2728,-2.3595;4.4453,.5897,-1.2191;2.7604,.9932,-3.6775;3.777,1.8297,-3.2501;1.5928,2.7932,-4.7542;1.6101,1.4704,-4.3765;.74,3.1829,-5.3187;2.838,-.3327,-3.3841;3.1268,.3351,-.9906;2.38,-.8552,-1.8869;.9173,-.7201,-1.6626;3.1031,-2.1654,-1.7;-.031,-3.7563,.7414;.4615,-5.2229,-4.695;.1659,-5.0243,-3.6608;-.5928,-4.4857,-1.0484;1.1034,-4.5059,-2.7689;-1.1391,-5.2983,-3.2473;-1.519,-5.0304,-1.934;.7359,-4.2455,-1.4465;2.1254,-4.2806,-3.0819;-1.8707,-5.7014,-3.9505;-2.549,-5.2178,-1.6203;-.8761,-4.0786,.269;-2.055,-3.9395,.8632;-2.894,-4.4626,.3999;-2.1127,-3.7746,2.3244;-2.2746,-3.5388,5.1128;-3.2952,-4.111,2.9993;-1.0144,-3.3157,3.0677;-1.0921,-3.1997,4.4522;-3.3737,-3.9972,4.3846;-4.1573,-4.4725,2.4316;-.0705,-3.0552,2.5827;-.2131,-2.8596,5.0071;-4.298,-4.2733,4.8996;-2.3344,-3.4564,6.2017;1.5655,-3.7688,-.5103;2.2738,-3.1694,-.9415;.4069,.6079,-4.5226;-3.0423,-2.0779,-.0663;-3.0334,-1.3387,1.1139;-2.0536,-.6241,1.5595;-.7228,.4677,1.3005;-.9431,1.3888,-.3026;.8058,-.5738,1.4682;-.894,1.6098,2.7757;-4.0829,-1.4247,1.9198;-4.0304,-.793,3.1888;-.5365,.7982,-1.1411;-.368,2.3319,-.2454;-2.0011,1.6478,-.4866;.9027,-.8971,2.5182;1.7021,.0117,1.1971;.7903,-1.4494,.7995;-.8884,1.0394,3.7215;-.0469,2.3192,2.8066;-1.8251,2.2023,2.7306;-3.1789,-1.1622,3.7822;-4.9742,-1.0542,3.6858;-3.9554,.3011,3.0755;4.8275,-.5223,.98;4.4816,-1.8778,.9255;3.7961,-2.4769,1.9759;3.4751,-1.7057,3.0884;3.8665,-.3747,3.2027;4.549,.2104,2.1413;4.6829,-2.4435,.0153;3.4642,-3.5138,1.9125;2.5945,-2.2781,4.1118;3.596,.1971,4.0911;4.828,1.2663,2.1916;-.8353,1.1405,-4.1436;-1.9791,.3549,-4.1218;-1.8736,-.9843,-4.4811;-.6669,-1.5376,-4.8971;.4674,-.7348,-4.9241;-.8952,2.1774,-3.8036;-2.9397,.7557,-3.797;-3.0582,-1.8416,-4.3645;-.6219,-2.5937,-5.1657;1.4219,-1.1693,-5.2226;2.1547,-1.5315,4.965;2.3152,-3.4561,4.0304;-2.9699,-2.9903,-4.743;-4.0603,-1.3571,-3.8774;7.1792,.9887,-1.6341;6.2398,1.4184,-2.6167;8.5699,1.15,-1.8815;9.0197,1.6875,-3.0624;9.2795,.8245,-1.1146;10.0922,1.8007,-3.2439;6.7397,1.9482,-3.8391;8.0904,2.0789,-4.0557;6.033,2.2437,-4.6178;8.4503,2.4821,-5.0065;3.7026,3.2273,-3.5712;2.6272,3.6908,-4.3846;4.6337,4.1889,-3.0861;4.5382,5.5132,-3.4417;5.4337,3.8693,-2.4166;5.2677,6.2303,-3.0546;2.5643,5.0642,-4.7493;3.5026,5.9584,-4.2975;1.7411,5.3987,-5.3883;3.4429,7.013,-4.5807;-4.3586,-2.6594,-.5275;-4.1894,-3.4194,-1.3089;-4.9312,-3.1133,.298;-4.9961,-1.8817,-.9875;-2.0485,-1.7137,-1.1363;-2.2953,-.7358,-1.5869;-1.0029,-1.6532,-.796;-2.0671,-2.4553,-1.9469;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648062914581</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000650472725 0.000108913680 0.023814240463 0.005337826610</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021409966 0.000007864 0.000063039 0.000090878 0.000150417 0.000185783 0.000235480 0.000314950 0.000484233 0.000531247 0.000555427 0.000671923 0.000746560 0.000769153 0.000822543 0.000937526 0.000990432 0.001079888 0.001105181 0.001170486 0.001253091 0.001319019 0.001432311 0.001573528 0.001648200 0.001928565 0.002043074 0.002131297 0.002187815 0.002371439 0.002606635 0.002965575 0.003282961 0.003335438 0.003707925 0.003881793 0.004040592 0.004405857 0.005028480 0.005351392 0.005474891 0.005892865 0.006104920 0.006458661 0.007157723 0.007600723 0.007764703 0.008192215 0.008815495 0.009337830 0.009861955 0.011044752 0.011600608 0.012736365 0.012930624 0.013305353 0.013706926 0.014594334 0.014879568 0.015200675 0.015454280 0.016017493 0.016557982 0.016790972 0.017271314 0.017709293 0.018600439 0.019219988 0.020652264 0.020787472 0.021321675 0.022419548 0.022796545 0.024001222 0.025852438 0.026332734 0.026770533 0.028272936 0.028779249 0.030553670 0.031089374 0.031404224 0.032027027 0.033347776 0.033745466 0.036802799 0.037290486 0.038891867 0.039181792 0.040749076 0.041390493 0.043659986 0.045092088 0.048233338 0.049061767 0.049439937 0.049982531 0.050951985 0.050994721 0.052106888 0.052332592 0.052392446 0.052535146 0.053392479 0.054032488 0.054636422 0.055074085 0.055820912 0.056362944 0.056457147 0.057033382 0.057665911 0.058396051 0.059528056 0.060597478 0.060827794 0.061207543 0.061769166 0.062258460 0.064890586 0.065628794 0.065740276 0.066265569 0.071243443 0.073711426 0.074347328 0.076760946 0.078598578 0.083509553 0.084158217 0.085021480 0.086195585 0.086856777 0.089579047 0.090469725 0.091939572 0.094408789 0.094642760 0.095552921 0.095826103 0.096110642 0.097373518 0.098208984 0.098887977 0.099332698 0.099913247 0.100519529 0.101438403 0.102204557 0.102983611 0.103726696 0.104374278 0.105977579 0.106075803 0.106636009 0.108410335 0.109591548 0.110478377 0.112247319 0.113029417 0.116249089 0.118119953 0.118457536 0.120940501 0.122608049 0.123391998 0.125499664 0.126257200 0.130394907 0.131556197 0.134755747 0.141536280 0.142301033 0.144786765 0.145752414 0.146386136 0.146713170 0.147051512 0.152423093 0.155223574 0.159439176 0.170446473 0.172537364 0.174907555 0.181756411 0.182640274 0.185921361 0.186591701 0.190606421 0.192520606 0.195961054 0.197603012 0.200038917 0.204693647 0.205583933 0.206729287 0.209146903 0.209612421 0.211967299 0.214671936 0.217574786 0.223854215 0.224653737 0.228937151 0.233415214 0.234043128 0.234791182 0.242993571 0.252858457 0.256484844 0.256643766 0.262645376 0.278090853 0.282222079 0.285972447 0.286946889 0.291190675 0.298390862 0.301938361 0.302919662 0.305128581 0.311830831 0.314461651 0.320525731 0.321411055 0.327174160 0.342767007 0.344592577 0.348108260 0.348921539 0.350187194 0.354271997 0.360739859 0.361445129 0.369743088 0.380255953 0.404060063 0.421641201 0.424451532 0.450429166 0.462657128 0.468593925 0.472803284 0.473752195 0.475619368 0.479430455 0.485682206 0.503434507 0.529368302 0.558000962 0.564053416 0.568016093 0.589922243 0.592085624 0.602307575 0.635340432 0.639044675 0.641831995 0.662122320 0.668188235 0.680346559 0.683647688 0.691222817 0.694091966 0.703808048 0.704695067 0.711694788 0.737808777 0.749890726 0.759262520 0.771829053 0.776571435 0.804063219 0.808658300 0.810850158 0.813144807 0.819316212 0.820430370 0.828629830 0.829400689 0.831137873 0.839406703 0.844137795 0.844894822 0.849374334 0.856899532 0.861390629 0.864546785 0.869750603 0.871096347 0.883123667 0.887374066 0.890899117 0.892332743 0.915805716 0.921885538 0.930254412 0.932035060 0.963504948 0.975085746 0.976605101 0.991197647 0.999287864 1.022696372 1.034246902 1.043458470 1.050961293 1.057918644 1.083755651 1.085378508 1.088419912 1.104692871 1.106578421 1.112035881 1.122551634 1.123465047 1.134948469 1.138921741 1.167327030 1.170524609 1.178726475 1.185370999 1.194048143 1.202717448 1.219665940 1.239323110 1.243599555 1.295233413 1.312859973 1.323316334 1.325221822 1.326410653 1.331944704 1.332977346 1.340340609 1.341691082 1.355374629 1.374673637 1.378136826 1.380925448 1.380935046 1.417899069 1.550963532 1.659882568 1.674170484</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">2</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37968603" y3="0.15332895" z3="-0.23149525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44470063" y3="0.06386796" z3="0.31627337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71635091" y3="0.38246852" z3="-0.43562317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83803771" y3="1.27212594" z3="-2.35928045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44780227" y3="0.58913138" z3="-1.21868608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76150871" y3="0.99301595" z3="-3.67634979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77848026" y3="1.82918734" z3="-3.24938134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.59407599" y3="2.79296091" z3="-4.75328498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.61165685" y3="1.47010029" z3="-4.37592533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.74141798" y3="3.18252567" z3="-5.31799607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.83809993" y3="-0.33276381" z3="-3.38201652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12934637" y3="0.33555201" z3="-0.98888213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3796938" y3="-0.85337843" z3="-1.88432466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91747305" y3="-0.71528114" z3="-1.65859186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10053448" y3="-2.16501423" z3="-1.69799517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.0322679" y3="-3.76039131" z3="0.74156621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.44976205" y3="-5.20920949" z3="-4.69968112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.15659799" y3="-5.01548535" z3="-3.66377796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.59660618" y3="-4.48785179" z3="-1.04769954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.09518626" y3="-4.49762194" z3="-2.7727843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.14640548" y3="-5.29521852" z3="-3.24771392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.52356212" y3="-5.03277686" z3="-1.93246765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.73055309" y3="-4.24312822" z3="-1.44825749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.11560615" y3="-4.26778193" z3="-3.08781154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.87851218" y3="-5.69826434" z3="-3.95030621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.55196215" y3="-5.22461591" z3="-1.6161842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.87791814" y3="-4.08401852" z3="0.27091826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.0560269" y3="-3.94343207" z3="0.86623642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.89598078" y3="-4.46537013" z3="0.40569961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11083132" y3="-3.77546833" z3="2.3272867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26875508" y3="-3.5314973" z3="5.11517635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29332794" y3="-4.10709728" z3="3.00455472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01038163" y3="-3.31732608" z3="3.067957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.08602276" y3="-3.19744634" z3="4.45220664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36992706" y3="-3.98916442" z3="4.38962887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.15715806" y3="-4.46746406" z3="2.4389012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0663462" y3="-3.06028061" z3="2.58122382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.20557591" y3="-2.85818472" z3="5.00530451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29445085" y3="-4.26090711" z3="4.90644481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.32707211" y3="-3.44537514" z3="6.20383974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.5609585" y3="-3.76767523" z3="-0.51239746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.27001918" y3="-3.16835858" z3="-0.94302773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.40952579" y3="0.606461" z3="-4.52415106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04372211" y3="-2.0799503" z3="-0.0676788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.03323105" y3="-1.34305017" z3="1.11369631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.04985944" y3="-0.63429553" z3="1.56071616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.72802997" y3="0.46936058" z3="1.30724478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.95284834" y3="1.38820237" z3="-0.29655065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.80800296" y3="-0.56102993" z3="1.47694015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.91256903" y3="1.60926728" z3="2.78276769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.08309422" y3="-1.42713291" z3="1.91956216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.02937976" y3="-0.79493308" z3="3.18816773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.53683008" y3="0.80098909" z3="-1.13315711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.3893922" y3="2.33828689" z3="-0.23802874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.01336841" y3="1.63426588" z3="-0.4845123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.90681516" y3="-0.88404985" z3="2.52685137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.70082768" y3="0.02982434" z3="1.20580708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79798008" y3="-1.43671691" z3="0.80817009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.90673296" y3="1.03798826" z3="3.72798834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.07069932" y3="2.32472096" z3="2.8178612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.84768373" y3="2.19524228" z3="2.73461553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.17503562" y3="-1.16085814" z3="3.77945856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.9709371" y3="-1.05917278" z3="3.68794385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.95860332" y3="0.29939154" z3="3.07435247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83102925" y3="-0.52373388" z3="0.97972492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4838378" y3="-1.87887391" z3="0.92422869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79851722" y3="-2.47820593" z3="1.97450206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.4793064" y3="-1.70774113" z3="3.08810558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.87229297" y3="-0.37730264" z3="3.20338166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.55433238" y3="0.20813866" z3="2.14186883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.68398949" y3="-2.44397815" z3="0.01343145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.46577141" y3="-3.51478941" z3="1.91051072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.59969431" y3="-2.28052652" z3="4.11202094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.60330975" y3="0.19381398" z3="4.09261683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.8343036" y3="1.26377611" z3="2.19288505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83356574" y3="1.13615406" z3="-4.14410931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.97629979" y3="0.34889063" z3="-4.12586871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.86876336" y3="-0.98881921" z3="-4.49023794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.6611051" y3="-1.53906822" z3="-4.9072501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.4722651" y3="-0.73476148" z3="-4.93003474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.89499995" y3="2.17192939" z3="-3.80089216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93775928" y3="0.74729728" z3="-3.80063877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.05270102" y3="-1.84789888" z3="-4.37950458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.61481132" y3="-2.59390201" z3="-5.18046483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.42769059" y3="-1.16686078" z3="-5.22924956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16409095" y3="-1.53516515" z3="4.96845197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31688914" y3="-3.4574946" z3="4.02805964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.96347228" y3="-2.99375775" z3="-4.76607517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.05533628" y3="-1.36744004" z3="-3.88950417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.18147808" y3="0.98756937" z3="-1.6353548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.24160784" y3="1.4173851" z3="-2.61735033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.57207398" y3="1.14881784" z3="-1.88343429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.02136296" y3="1.68649102" z3="-3.06450311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28204291" y3="0.8232559" z3="-1.11682933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.09374293" y3="1.79966812" z3="-3.24642986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.74090862" y3="1.94721611" z3="-3.84001811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.09152281" y3="2.07797571" z3="-4.0572511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03386423" y3="2.24283902" z3="-4.61831944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.45094354" y3="2.48129892" z3="-5.0081865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.70412949" y3="3.22676973" z3="-3.5704527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.62851232" y3="3.69050322" z3="-4.383469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.63543563" y3="4.18823797" z3="-3.08547928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.53985881" y3="5.51262276" z3="-3.44068994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.43565333" y3="3.86839544" z3="-2.41628096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.26944316" y3="6.22962521" z3="-3.05356733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.56552079" y3="5.06399115" z3="-4.74779483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.50402663" y3="5.95805267" z3="-4.29606178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.74222224" y3="5.39859955" z3="-5.38657047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.44424683" y3="7.01268839" z3="-4.57900999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.36054726" y3="-2.65831137" z3="-0.53072009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.19154948" y3="-3.42236101" z3="-1.3081786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.93793712" y3="-3.10616838" z3="0.29464769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99284303" y3="-1.88011733" z3="-0.99661652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.04925005" y3="-1.71650969" z3="-1.13726118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29550268" y3="-0.73881031" z3="-1.58757749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00395876" y3="-1.65630513" z3="-0.79632154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.06844413" y3="-2.45766051" z3="-1.94825769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3797,.1533,-.2315;7.4447,.0639,.3163;6.7164,.3825,-.4356;4.838,1.2721,-2.3593;4.4478,.5891,-1.2187;2.7615,.993,-3.6763;3.7785,1.8292,-3.2494;1.5941,2.793,-4.7533;1.6117,1.4701,-4.3759;.7414,3.1825,-5.318;2.8381,-.3328,-3.382;3.1293,.3356,-.9889;2.3797,-.8534,-1.8843;.9175,-.7153,-1.6586;3.1005,-2.165,-1.698;-.0323,-3.7604,.7416;.4498,-5.2092,-4.6997;.1566,-5.0155,-3.6638;-.5966,-4.4879,-1.0477;1.0952,-4.4976,-2.7728;-1.1464,-5.2952,-3.2477;-1.5236,-5.0328,-1.9325;.7306,-4.2431,-1.4483;2.1156,-4.2678,-3.0878;-1.8785,-5.6983,-3.9503;-2.552,-5.2246,-1.6162;-.8779,-4.084,.2709;-2.056,-3.9434,.8662;-2.896,-4.4654,.4057;-2.1108,-3.7755,2.3273;-2.2688,-3.5315,5.1152;-3.2933,-4.1071,3.0046;-1.0104,-3.3173,3.068;-1.086,-3.1974,4.4522;-3.3699,-3.9892,4.3896;-4.1572,-4.4675,2.4389;-.0663,-3.0603,2.5812;-.2056,-2.8582,5.0053;-4.2945,-4.2609,4.9064;-2.3271,-3.4454,6.2038;1.561,-3.7677,-.5124;2.27,-3.1684,-.943;.4095,.6065,-4.5242;-3.0437,-2.08,-.0677;-3.0332,-1.3431,1.1137;-2.0499,-.6343,1.5607;-.728,.4694,1.3072;-.9528,1.3882,-.2966;.808,-.561,1.4769;-.9126,1.6093,2.7828;-4.0831,-1.4271,1.9196;-4.0294,-.7949,3.1882;-.5368,.801,-1.1332;-.3894,2.3383,-.238;-2.0134,1.6343,-.4845;.9068,-.884,2.5269;1.7008,.0298,1.2058;.798,-1.4367,.8082;-.9067,1.038,3.728;-.0707,2.3247,2.8179;-1.8477,2.1952,2.7346;-3.175,-1.1609,3.7795;-4.9709,-1.0592,3.6879;-3.9586,.2994,3.0744;4.831,-.5237,.9797;4.4838,-1.8789,.9242;3.7985,-2.4782,1.9745;3.4793,-1.7077,3.0881;3.8723,-.3773,3.2034;4.5543,.2081,2.1419;4.684,-2.444,.0134;3.4658,-3.5148,1.9105;2.5997,-2.2805,4.112;3.6033,.1938,4.0926;4.8343,1.2638,2.1929;-.8336,1.1362,-4.1441;-1.9763,.3489,-4.1259;-1.8688,-.9888,-4.4902;-.6611,-1.5391,-4.9073;.4723,-.7348,-4.93;-.895,2.1719,-3.8009;-2.9378,.7473,-3.8006;-3.0527,-1.8479,-4.3795;-.6148,-2.5939,-5.1805;1.4277,-1.1669,-5.2292;2.1641,-1.5352,4.9685;2.3169,-3.4575,4.0281;-2.9635,-2.9938,-4.7661;-4.0553,-1.3674,-3.8895;7.1815,.9876,-1.6354;6.2416,1.4174,-2.6174;8.5721,1.1488,-1.8834;9.0214,1.6865,-3.0645;9.282,.8233,-1.1168;10.0937,1.7997,-3.2464;6.7409,1.9472,-3.84;8.0915,2.078,-4.0573;6.0339,2.2428,-4.6183;8.4509,2.4813,-5.0082;3.7041,3.2268,-3.5705;2.6285,3.6905,-4.3835;4.6354,4.1882,-3.0855;4.5399,5.5126,-3.4407;5.4357,3.8684,-2.4163;5.2694,6.2296,-3.0536;2.5655,5.064,-4.7478;3.504,5.9581,-4.2961;1.7422,5.3986,-5.3866;3.4442,7.0127,-4.579;-4.3605,-2.6583,-.5307;-4.1915,-3.4224,-1.3082;-4.9379,-3.1062,.2946;-4.9928,-1.8801,-.9966;-2.0493,-1.7165,-1.1373;-2.2955,-.7388,-1.5876;-1.004,-1.6563,-.7963;-2.0684,-2.4577,-1.9483;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648073852723</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000332279733 0.000056052034 0.029053263908 0.005331823658</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021453765 0.000006282 0.000071506 0.000109936 0.000162752 0.000198578 0.000277722 0.000316011 0.000497868 0.000532813 0.000567634 0.000686778 0.000747339 0.000772185 0.000833950 0.000939205 0.000998791 0.001086961 0.001115449 0.001172439 0.001257638 0.001320120 0.001433058 0.001574351 0.001648291 0.001928358 0.002043099 0.002134262 0.002193319 0.002371724 0.002610493 0.002977306 0.003283446 0.003344421 0.003705616 0.003882489 0.004040655 0.004406652 0.005030797 0.005351532 0.005479806 0.005892849 0.006105028 0.006479659 0.007157859 0.007601030 0.007764762 0.008192822 0.008816560 0.009338041 0.009866340 0.011044820 0.011600777 0.012739854 0.012932629 0.013305601 0.013707205 0.014594451 0.014879540 0.015200579 0.015454370 0.016017498 0.016557979 0.016791141 0.017271448 0.017713482 0.018600445 0.019220086 0.020652247 0.020787418 0.021321651 0.022419549 0.022796554 0.024001221 0.025852439 0.026332741 0.026770532 0.028272935 0.028779259 0.030553695 0.031089366 0.031404251 0.032027258 0.033347803 0.033745908 0.036802788 0.037291436 0.038892094 0.039181860 0.040749136 0.041390492 0.043662102 0.045092113 0.048233348 0.049061821 0.049440027 0.049982672 0.050951994 0.050994786 0.052107583 0.052332593 0.052392446 0.052536370 0.053392470 0.054034037 0.054636590 0.055078663 0.055820961 0.056362953 0.056457146 0.057033382 0.057665912 0.058396067 0.059528171 0.060597735 0.060827910 0.061207625 0.061769159 0.062258438 0.064890646 0.065629325 0.065740487 0.066265744 0.071243484 0.073715009 0.074347542 0.076769163 0.078598796 0.083509563 0.084158217 0.085021410 0.086195580 0.086856760 0.089579051 0.090469783 0.091939579 0.094408795 0.094642774 0.095553372 0.095826205 0.096110642 0.097373519 0.098209008 0.098888073 0.099333075 0.099914055 0.100519519 0.101438462 0.102204966 0.102983786 0.103727060 0.104374329 0.105977577 0.106075896 0.106636164 0.108410458 0.109591627 0.110478454 0.112247364 0.113029427 0.116249091 0.118119953 0.118461038 0.120945991 0.122608051 0.123395191 0.125499862 0.126257196 0.130395787 0.131556281 0.134757546 0.141536664 0.142301484 0.144787078 0.145752846 0.146386160 0.146714099 0.147051663 0.152423100 0.155223610 0.159440539 0.170446473 0.172537995 0.174907557 0.181756467 0.182640283 0.185923111 0.186593877 0.190606421 0.192520577 0.195961048 0.197603230 0.200040457 0.204694425 0.205583932 0.206729287 0.209146914 0.209612441 0.211967383 0.214672001 0.217574788 0.223855837 0.224653809 0.228937159 0.233418979 0.234044542 0.234796200 0.242993571 0.252858462 0.256485210 0.256643854 0.262645379 0.278090853 0.282222515 0.285972469 0.286946898 0.291190682 0.298390864 0.301938395 0.302919621 0.305128731 0.311830872 0.314461651 0.320525731 0.321411780 0.327174181 0.342773569 0.344592798 0.348108273 0.348921557 0.350187192 0.354272000 0.360741596 0.361445129 0.369747235 0.380255997 0.404060077 0.421641236 0.424451869 0.450429548 0.462657306 0.468593926 0.472804565 0.473754759 0.475619368 0.479430483 0.485682682 0.503434981 0.529368512 0.558000952 0.564053548 0.568016654 0.589933579 0.592091350 0.602307578 0.635340945 0.639044660 0.641832001 0.662124259 0.668188409 0.680353664 0.683647743 0.691223753 0.694101215 0.703808048 0.704695069 0.711694788 0.737808814 0.749890727 0.759262541 0.771829053 0.776571438 0.804063389 0.808658318 0.810850193 0.813144887 0.819316212 0.820435206 0.828654438 0.829400942 0.831165288 0.839406716 0.844138243 0.844895739 0.849375943 0.856922332 0.861390935 0.864546798 0.869750655 0.871096392 0.883130090 0.887374287 0.890899643 0.892332748 0.915805783 0.921885540 0.930254808 0.932035086 0.963527478 0.975087430 0.976605979 0.991197933 0.999287865 1.022697046 1.034246978 1.043464789 1.050964231 1.057923789 1.083755791 1.085389482 1.088420301 1.104693778 1.106578443 1.112035882 1.122551636 1.123465047 1.134951642 1.138924690 1.167327036 1.170524814 1.178726483 1.185381334 1.194048144 1.202717451 1.219674662 1.239330645 1.243599704 1.295233413 1.312860078 1.323316335 1.325222300 1.326410651 1.331944759 1.332977906 1.340340719 1.341691148 1.355376546 1.374673641 1.378137102 1.380925489 1.380935061 1.417930200 1.550963578 1.659882626 1.674170485</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">3</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38258321" y3="0.15146427" z3="-0.23406881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44799016" y3="0.0597418" z3="0.31195089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.7192633" y3="0.37993656" z3="-0.43890644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.84005736" y3="1.2737072" z3="-2.35978628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.45020645" y3="0.589226" z3="-1.21994091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76356688" y3="0.99573" z3="-3.67654815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.78012868" y3="1.8318517" z3="-3.24875421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.59396174" y3="2.79642238" z3="-4.7499582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.61344551" y3="1.47281448" z3="-4.37553933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.7405826" y3="3.18614271" z3="-5.31349175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84037253" y3="-0.33020552" z3="-3.38282727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13181471" y3="0.33627828" z3="-0.98932581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37904754" y3="-0.85003609" z3="-1.88572817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91719598" y3="-0.70716347" z3="-1.66071334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09556145" y3="-2.16411546" z3="-1.69974462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.03569606" y3="-3.76434864" z3="0.74567542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.43500501" y3="-5.20462037" z3="-4.69932716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.14456906" y3="-5.01337297" z3="-3.66220917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.60232513" y3="-4.49124858" z3="-1.0434326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.08431795" y3="-4.49375915" z3="-2.77346167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.15624399" y3="-5.2980316" z3="-3.24257798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.53014173" y3="-5.03851877" z3="-1.92583775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.7228919" y3="-4.24195892" z3="-1.44753054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.10297411" y3="-4.26001052" z3="-3.09135365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.8890424" y3="-5.70261579" z3="-3.94356168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.5567981" y3="-5.23445472" z3="-1.60634524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.88179526" y3="-4.08768455" z3="0.27569172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.05951023" y3="-3.9432481" z3="0.87091803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.90102623" y3="-4.46437367" z3="0.41120609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1132919" y3="-3.77326434" z3="2.33173382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26764411" y3="-3.52576536" z3="5.11938714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29499066" y3="-4.10396411" z3="3.01074069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01213177" y3="-3.31365143" z3="3.07035137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0859016" y3="-3.19215101" z3="4.45452383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36974158" y3="-3.98433507" z3="4.39579287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.15954483" y3="-4.4647871" z3="2.44643373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06907882" y3="-3.05646767" z3="2.58186357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.20475672" y3="-2.85208301" z3="5.00601605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29349472" y3="-4.25555295" z3="4.91418711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.32444277" y3="-3.43853532" z3="6.20802571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55413603" y3="-3.76443984" z3="-0.51360124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.26309531" y3="-3.16572727" z3="-0.94536057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.41376635" y3="0.60638281" z3="-4.52670735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04152114" y3="-2.08097109" z3="-0.06612854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.03339191" y3="-1.34334047" z3="1.11473538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.05045107" y3="-0.63520033" z3="1.56346592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.73063475" y3="0.47047079" z3="1.30995752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.95830655" y3="1.38967872" z3="-0.29331093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8065381" y3="-0.55855099" z3="1.47649499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.9173974" y3="1.6085461" z3="2.78655607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.08500825" y3="-1.42632436" z3="1.91836239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.03415612" y3="-0.79249896" z3="3.18625893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.53887918" y3="0.80481575" z3="-1.12979726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.39966367" y3="2.34237903" z3="-0.2339615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.01969976" y3="1.63068302" z3="-0.48203693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.90820327" y3="-0.88165415" z3="2.52613356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.69869091" y3="0.03209309" z3="1.20293994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.7942509" y3="-1.43429376" z3="0.80772891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.91038576" y3="1.03622883" z3="3.73114688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.07768472" y3="2.32640824" z3="2.82268502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.85420466" y3="2.19182207" z3="2.73873841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.1804663" y3="-1.15663864" z3="3.77946938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.97628975" y3="-1.05707125" z3="3.68466141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.96443791" y3="0.30174592" z3="3.07109506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83390396" y3="-0.52632972" z3="0.97671975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.48402951" y3="-1.88071933" z3="0.91974715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79806936" y3="-2.47997837" z3="1.96964898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.48086664" y3="-1.71019716" z3="3.08430795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.87648879" y3="-0.3806548" z3="3.20098043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.55922098" y3="0.20469092" z3="2.13987525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.68244085" y3="-2.44513706" z3="0.00814075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.4632828" y3="-3.51584246" z3="1.90457987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.60102305" y3="-2.28259423" z3="4.10821728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.60922446" y3="0.18988931" z3="4.09110126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.84136685" y3="1.25969709" z3="2.19204357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83070119" y3="1.12927878" z3="-4.14202162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.97021243" y3="0.33718678" z3="-4.12608015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.85795284" y3="-0.99798664" z3="-4.49841395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.64885419" y3="-1.54106697" z3="-4.92078786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.48135038" y3="-0.73228971" z3="-4.94021055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.89557149" y3="2.16305521" z3="-3.79331213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93279062" y3="0.72997872" z3="-3.79724457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.03854331" y3="-1.86233963" z3="-4.39280326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.59930228" y3="-2.59386524" z3="-5.20122401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.43820404" y3="-1.15878214" z3="-5.24312823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16664845" y3="-1.53721447" z3="4.96522728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31687261" y3="-3.4591571" z3="4.02379237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.94759569" y3="-3.0027378" z3="-4.79512843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.04043801" y3="-1.39119933" z3="-3.89195436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.18386852" y3="0.98651749" z3="-1.63810906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.24349666" y3="1.41860648" z3="-2.61864254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.57437755" y3="1.14704007" z3="-1.88717792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.02306177" y3="1.68622321" z3="-3.06779584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28478089" y3="0.81966725" z3="-1.12174395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.09537566" y3="1.7987642" z3="-3.25051781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.74214242" y3="1.95011872" z3="-3.8408549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.09266984" y3="2.08013733" z3="-4.05907073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03463931" y3="2.24760564" z3="-4.61803828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.45158136" y3="2.48472868" z3="-5.00966344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.70475314" y3="3.22980337" z3="-3.56791928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.62789472" y3="3.69418396" z3="-4.37899556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.63620022" y3="4.19096535" z3="-3.08263124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.5394673" y3="5.51587685" z3="-3.43558159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.43749811" y3="3.87041446" z3="-2.41504875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.26923636" y3="6.23263613" z3="-3.04835246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.56362923" y3="5.0682708" z3="-4.74082121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.50220707" y3="5.96212372" z3="-4.28878796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.73938645" y3="5.4034906" z3="-5.37805945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.44145869" y3="7.01719348" z3="-4.5699231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.35784857" y3="-2.65859965" z3="-0.53171463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.18787477" y3="-3.42422753" z3="-1.30732855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9377811" y3="-3.10437405" z3="0.29303745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.98788675" y3="-1.88024926" z3="-1.00057267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.04420222" y3="-1.71814943" z3="-1.13354258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28966094" y3="-0.74078935" z3="-1.58544028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-0.99988546" y3="-1.65713577" z3="-0.78939998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.06099229" y3="-2.45939525" z3="-1.9444684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3826,.1515,-.2341;7.448,.0597,.312;6.7193,.3799,-.4389;4.8401,1.2737,-2.3598;4.4502,.5892,-1.2199;2.7636,.9957,-3.6765;3.7801,1.8319,-3.2488;1.594,2.7964,-4.75;1.6134,1.4728,-4.3755;.7406,3.1861,-5.3135;2.8404,-.3302,-3.3828;3.1318,.3363,-.9893;2.379,-.85,-1.8857;.9172,-.7072,-1.6607;3.0956,-2.1641,-1.6997;-.0357,-3.7643,.7457;.435,-5.2046,-4.6993;.1446,-5.0134,-3.6622;-.6023,-4.4912,-1.0434;1.0843,-4.4938,-2.7735;-1.1562,-5.298,-3.2426;-1.5301,-5.0385,-1.9258;.7229,-4.242,-1.4475;2.103,-4.26,-3.0914;-1.889,-5.7026,-3.9436;-2.5568,-5.2345,-1.6063;-.8818,-4.0877,.2757;-2.0595,-3.9432,.8709;-2.901,-4.4644,.4112;-2.1133,-3.7733,2.3317;-2.2676,-3.5258,5.1194;-3.295,-4.104,3.0107;-1.0121,-3.3137,3.0704;-1.0859,-3.1922,4.4545;-3.3697,-3.9843,4.3958;-4.1595,-4.4648,2.4464;-.0691,-3.0565,2.5819;-.2048,-2.8521,5.006;-4.2935,-4.2556,4.9142;-2.3244,-3.4385,6.208;1.5541,-3.7644,-.5136;2.2631,-3.1657,-.9454;.4138,.6064,-4.5267;-3.0415,-2.081,-.0661;-3.0334,-1.3433,1.1147;-2.0505,-.6352,1.5635;-.7306,.4705,1.31;-.9583,1.3897,-.2933;.8065,-.5586,1.4765;-.9174,1.6085,2.7866;-4.085,-1.4263,1.9184;-4.0342,-.7925,3.1863;-.5389,.8048,-1.1298;-.3997,2.3424,-.234;-2.0197,1.6307,-.482;.9082,-.8817,2.5261;1.6987,.0321,1.2029;.7943,-1.4343,.8077;-.9104,1.0362,3.7311;-.0777,2.3264,2.8227;-1.8542,2.1918,2.7387;-3.1805,-1.1566,3.7795;-4.9763,-1.0571,3.6847;-3.9644,.3017,3.0711;4.8339,-.5263,.9767;4.484,-1.8807,.9197;3.7981,-2.48,1.9696;3.4809,-1.7102,3.0843;3.8765,-.3807,3.201;4.5592,.2047,2.1399;4.6824,-2.4451,.0081;3.4633,-3.5158,1.9046;2.601,-2.2826,4.1082;3.6092,.1899,4.0911;4.8414,1.2597,2.192;-.8307,1.1293,-4.142;-1.9702,.3372,-4.1261;-1.858,-.998,-4.4984;-.6489,-1.5411,-4.9208;.4814,-.7323,-4.9402;-.8956,2.1631,-3.7933;-2.9328,.73,-3.7972;-3.0385,-1.8623,-4.3928;-.5993,-2.5939,-5.2012;1.4382,-1.1588,-5.2431;2.1666,-1.5372,4.9652;2.3169,-3.4592,4.0238;-2.9476,-3.0027,-4.7951;-4.0404,-1.3912,-3.892;7.1839,.9865,-1.6381;6.2435,1.4186,-2.6186;8.5744,1.147,-1.8872;9.0231,1.6862,-3.0678;9.2848,.8197,-1.1217;10.0954,1.7988,-3.2505;6.7421,1.9501,-3.8409;8.0927,2.0801,-4.0591;6.0346,2.2476,-4.618;8.4516,2.4847,-5.0097;3.7048,3.2298,-3.5679;2.6279,3.6942,-4.379;4.6362,4.191,-3.0826;4.5395,5.5159,-3.4356;5.4375,3.8704,-2.415;5.2692,6.2326,-3.0484;2.5636,5.0683,-4.7408;3.5022,5.9621,-4.2888;1.7394,5.4035,-5.3781;3.4415,7.0172,-4.5699;-4.3578,-2.6586,-.5317;-4.1879,-3.4242,-1.3073;-4.9378,-3.1044,.293;-4.9879,-1.8802,-1.0006;-2.0442,-1.7181,-1.1335;-2.2897,-.7408,-1.5854;-.9999,-1.6571,-.7894;-2.061,-2.4594,-1.9445;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648077202060</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000408374983 0.000042528367 0.026846468788 0.005304327075</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455222 -0.000014563 0.000092961 0.000124559 0.000169399 0.000195585 0.000279982 0.000318161 0.000497924 0.000532861 0.000571302 0.000687311 0.000747298 0.000773079 0.000833759 0.000939495 0.000998796 0.001087042 0.001115537 0.001173201 0.001257791 0.001322024 0.001433359 0.001574357 0.001649328 0.001928268 0.002043218 0.002134033 0.002193245 0.002371873 0.002611404 0.002979996 0.003284054 0.003354132 0.003714851 0.003882451 0.004041042 0.004406618 0.005031779 0.005351523 0.005481083 0.005893029 0.006105010 0.006482985 0.007158136 0.007602180 0.007764737 0.008193108 0.008816613 0.009338128 0.009867832 0.011045498 0.011600899 0.012740709 0.012932464 0.013305737 0.013707157 0.014594421 0.014879491 0.015200568 0.015454400 0.016017497 0.016557981 0.016791254 0.017271536 0.017713794 0.018600473 0.019220197 0.020652493 0.020787704 0.021321640 0.022419565 0.022796557 0.024001224 0.025852439 0.026332740 0.026770537 0.028272938 0.028779258 0.030553707 0.031089369 0.031404285 0.032027595 0.033347822 0.033746170 0.036802809 0.037291903 0.038892434 0.039182112 0.040749116 0.041390490 0.043662568 0.045092141 0.048233360 0.049061880 0.049440084 0.049982801 0.050952109 0.050994772 0.052107781 0.052332592 0.052392446 0.052536577 0.053392495 0.054034308 0.054636615 0.055079326 0.055820959 0.056362953 0.056457143 0.057033383 0.057665933 0.058396077 0.059528173 0.060597794 0.060827902 0.061207626 0.061769225 0.062258437 0.064890647 0.065629361 0.065740482 0.066265776 0.071243482 0.073715272 0.074347559 0.076769507 0.078598796 0.083509518 0.084158220 0.085021516 0.086195580 0.086856773 0.089579053 0.090469775 0.091939578 0.094408817 0.094642774 0.095553380 0.095826238 0.096110640 0.097373526 0.098209009 0.098888100 0.099333059 0.099914470 0.100519563 0.101438679 0.102204970 0.102983776 0.103727180 0.104374408 0.105977627 0.106076049 0.106636161 0.108410800 0.109591724 0.110478452 0.112247371 0.113029435 0.116249089 0.118119946 0.118460938 0.120947324 0.122608112 0.123395100 0.125499869 0.126257242 0.130395778 0.131556271 0.134757590 0.141536775 0.142301468 0.144787179 0.145753716 0.146386498 0.146714514 0.147052285 0.152423155 0.155223954 0.159440658 0.170446533 0.172538028 0.174907561 0.181756538 0.182640319 0.185923083 0.186594034 0.190606424 0.192520650 0.195961119 0.197603386 0.200040380 0.204694404 0.205583936 0.206729287 0.209146920 0.209612445 0.211967560 0.214672314 0.217574801 0.223855875 0.224653808 0.228937162 0.233418969 0.234044535 0.234796545 0.242993602 0.252858606 0.256485282 0.256643877 0.262645385 0.278090855 0.282222551 0.285972634 0.286946914 0.291190682 0.298390883 0.301938413 0.302919877 0.305128796 0.311830874 0.314461654 0.320525792 0.321411866 0.327174189 0.342776644 0.344593313 0.348108372 0.348921835 0.350187387 0.354271999 0.360741595 0.361445171 0.369747188 0.380257319 0.404060924 0.421641236 0.424452033 0.450429607 0.462658263 0.468593926 0.472804522 0.473758137 0.475619379 0.479431903 0.485683100 0.503436126 0.529369233 0.558002116 0.564054084 0.568017362 0.589933614 0.592091516 0.602307628 0.635341001 0.639044737 0.641832043 0.662124249 0.668188727 0.680353757 0.683648223 0.691223764 0.694102181 0.703808048 0.704695116 0.711695003 0.737808895 0.749890728 0.759262553 0.771829056 0.776571439 0.804063496 0.808658336 0.810850468 0.813145065 0.819316308 0.820435294 0.828654725 0.829401077 0.831168363 0.839406822 0.844138249 0.844895885 0.849375932 0.856924791 0.861390984 0.864546798 0.869750673 0.871096551 0.883132175 0.887374290 0.890899870 0.892332752 0.915806490 0.921885545 0.930254857 0.932035127 0.963529243 0.975087428 0.976606031 0.991197930 0.999287872 1.022697083 1.034247019 1.043464823 1.050964604 1.057924962 1.083755857 1.085393655 1.088420404 1.104693812 1.106578443 1.112035882 1.122551636 1.123465052 1.134951754 1.138925049 1.167327035 1.170524815 1.178726485 1.185383259 1.194048145 1.202717451 1.219678190 1.239338147 1.243623167 1.295233416 1.312860131 1.323316334 1.325222610 1.326410666 1.331945452 1.332978500 1.340340734 1.341691153 1.355379011 1.374673642 1.378137099 1.380925500 1.380935059 1.417933376 1.550963578 1.659882633 1.674175879</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">4</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38388882" y3="0.14789986" z3="-0.23438016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44956497" y3="0.05813221" z3="0.31091487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.72021333" y3="0.37837014" z3="-0.43931577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83928436" y3="1.27276894" z3="-2.35814077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.45064261" y3="0.58571958" z3="-1.21944317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76287424" y3="0.99459062" z3="-3.67487011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77830153" y3="1.83128801" z3="-3.24558803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.59008524" y3="2.79590251" z3="-4.74385267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.61210602" y3="1.47134266" z3="-4.37297087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.73599702" y3="3.18549043" z3="-5.30640653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84137322" y3="-0.33177511" z3="-3.38340213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13265044" y3="0.33079317" z3="-0.98885518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38018105" y3="-0.8543011" z3="-1.8872161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91833118" y3="-0.71216087" z3="-1.66159793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0966981" y3="-2.1686388" z3="-1.70345209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.03647105" y3="-3.75977835" z3="0.7446354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.42784442" y3="-5.20761846" z3="-4.69893624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.13874608" y3="-5.01513161" z3="-3.66172176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.60494303" y3="-4.48953301" z3="-1.04280039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.08006728" y3="-4.49640759" z3="-2.77415664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.16204998" y3="-5.29749721" z3="-3.24076653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.53429245" y3="-5.03627574" z3="-1.92395731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.72028744" y3="-4.24297896" z3="-1.44812771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.09876185" y3="-4.26457225" z3="-3.09307291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.8960386" y3="-5.70148881" z3="-3.940835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.56090176" y3="-5.23038813" z3="-1.60346709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.88298671" y3="-4.08387698" z3="0.27594854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.0604581" y3="-3.93913203" z3="0.87183835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.9016564" y3="-4.46132946" z3="0.41330004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11362425" y3="-3.76835275" z3="2.33261577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26779434" y3="-3.51934132" z3="5.12014901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29588653" y3="-4.09692315" z3="3.01176971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0117505" y3="-3.31015667" z3="3.07103018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.08544867" y3="-3.18796808" z3="4.45516817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3706069" y3="-3.97648855" z3="4.39673815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.16098804" y3="-4.45656435" z3="2.44751205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06815294" y3="-3.05487673" z3="2.5825385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.20377323" y3="-2.84918656" z3="5.00659224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29486633" y3="-4.24595805" z3="4.91521108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.32453708" y3="-3.43149706" z3="6.20874805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55323768" y3="-3.76628472" z3="-0.5152528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.26292926" y3="-3.16937176" z3="-0.94803878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.41480762" y3="0.60232213" z3="-4.52785504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04308482" y3="-2.07836514" z3="-0.06613096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.03103895" y3="-1.33928541" z3="1.1139802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.04544122" y3="-0.63330657" z3="1.56016278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.72625768" y3="0.47316313" z3="1.30709119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.95286675" y3="1.38926848" z3="-0.29798917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.81144841" y3="-0.55441457" z3="1.47829677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.91531921" y3="1.61398632" z3="2.78137237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.08144107" y3="-1.41904607" z3="1.9195529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.02681468" y3="-0.78451792" z3="3.18700411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.53505069" y3="0.80181244" z3="-1.13333519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.39246417" y3="2.34092859" z3="-0.24098784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.01384466" y3="1.63178586" z3="-0.48663138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.91171392" y3="-0.87532224" z3="2.52874569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.70351724" y3="0.03654961" z3="1.20504496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80152101" y3="-1.43163364" z3="0.8114036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.90987833" y3="1.04344645" z3="3.72704838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.07542654" y3="2.33160566" z3="2.81751355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.85180089" y3="2.19753936" z3="2.73106559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.17284189" y3="-1.15018935" z3="3.77888347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.96863205" y3="-1.04668663" z3="3.68736739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.95495777" y3="0.30948634" z3="3.07096857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83615236" y3="-0.53108625" z3="0.97613689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.48333879" y3="-1.88464468" z3="0.91742609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79714204" y3="-2.48402546" z3="1.967084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.48283006" y3="-1.71528666" z3="3.08330217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.88184" y3="-0.38691597" z3="3.20182189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.56470591" y3="0.19860451" z3="2.14089692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.67940318" y3="-2.44802197" z3="0.00465786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45986784" y3="-3.51900501" z3="1.9006246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.60239387" y3="-2.28715725" z3="4.10697711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.61686716" y3="0.18279874" z3="4.09316235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.84925189" y3="1.25290607" z3="2.19443409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83143629" y3="1.11993913" z3="-4.14192782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.9686092" y3="0.32432699" z3="-4.13019872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.85217391" y3="-1.00881667" z3="-4.50842763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.64118593" y3="-1.5464417" z3="-4.93230661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.48671044" y3="-0.73435036" z3="-4.94700614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.89959158" y3="2.15209293" z3="-3.78905534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93264753" y3="0.71285094" z3="-3.80058265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.03046007" y3="-1.87705426" z3="-4.40879353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.5885969" y3="-2.59764245" z3="-5.21798694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.44503161" y3="-1.15663137" z3="-5.25117586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1710678" y3="-1.54218765" z3="4.96596191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31472677" y3="-3.46277197" z3="4.02045063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.93730966" y3="-3.01334817" z3="-4.8219749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.03281577" y3="-1.41291752" z3="-3.90223826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.18368664" y3="0.98722253" z3="-1.63781589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.24243541" y3="1.41993818" z3="-2.61723001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.57391018" y3="1.14965519" z3="-1.8872221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.0214958" y3="1.69144051" z3="-3.06707529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28500532" y3="0.82164761" z3="-1.1227032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.09360966" y3="1.80540161" z3="-3.25009153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73995613" y3="1.95437384" z3="-3.83862919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.09025118" y3="2.08626767" z3="-4.05718449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03178397" y3="2.25260447" z3="-4.61492498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.4483236" y3="2.49306359" z3="-5.00715883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.70064369" y3="3.22985641" z3="-3.56151674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.62253811" y3="3.69452996" z3="-4.37078186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.63093275" y3="4.19126897" z3="-3.07449514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.53182862" y3="5.51692731" z3="-3.42400859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.43322698" y3="3.87030827" z3="-2.40830482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.26074726" y3="6.23387003" z3="-3.03551276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.55578755" y3="5.06945703" z3="-4.72899999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.49321304" y3="5.96368262" z3="-4.27529765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.73059763" y3="5.40498286" z3="-5.36485177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.43054642" y3="7.01938314" z3="-4.5536693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.3612371" y3="-2.65573424" z3="-0.52671723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.19422376" y3="-3.42254838" z3="-1.30173985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.93874669" y3="-3.10001397" z3="0.3005592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99230757" y3="-1.87771321" z3="-0.99461111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.0488439" y3="-1.71776453" z3="-1.13710631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29455369" y3="-0.74050827" z3="-1.58888154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00336756" y3="-1.65801585" z3="-0.79670929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.06976528" y3="-2.45970153" z3="-1.94727846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3839,.1479,-.2344;7.4496,.0581,.3109;6.7202,.3784,-.4393;4.8393,1.2728,-2.3581;4.4506,.5857,-1.2194;2.7629,.9946,-3.6749;3.7783,1.8313,-3.2456;1.5901,2.7959,-4.7439;1.6121,1.4713,-4.373;.736,3.1855,-5.3064;2.8414,-.3318,-3.3834;3.1327,.3308,-.9889;2.3802,-.8543,-1.8872;.9183,-.7122,-1.6616;3.0967,-2.1686,-1.7035;-.0365,-3.7598,.7446;.4278,-5.2076,-4.6989;.1387,-5.0151,-3.6617;-.6049,-4.4895,-1.0428;1.0801,-4.4964,-2.7742;-1.162,-5.2975,-3.2408;-1.5343,-5.0363,-1.924;.7203,-4.243,-1.4481;2.0988,-4.2646,-3.0931;-1.896,-5.7015,-3.9408;-2.5609,-5.2304,-1.6035;-.883,-4.0839,.2759;-2.0605,-3.9391,.8718;-2.9017,-4.4613,.4133;-2.1136,-3.7684,2.3326;-2.2678,-3.5193,5.1201;-3.2959,-4.0969,3.0118;-1.0118,-3.3102,3.071;-1.0854,-3.188,4.4552;-3.3706,-3.9765,4.3967;-4.161,-4.4566,2.4475;-.0682,-3.0549,2.5825;-.2038,-2.8492,5.0066;-4.2949,-4.246,4.9152;-2.3245,-3.4315,6.2087;1.5532,-3.7663,-.5153;2.2629,-3.1694,-.948;.4148,.6023,-4.5279;-3.0431,-2.0784,-.0661;-3.031,-1.3393,1.114;-2.0454,-.6333,1.5602;-.7263,.4732,1.3071;-.9529,1.3893,-.298;.8114,-.5544,1.4783;-.9153,1.614,2.7814;-4.0814,-1.419,1.9196;-4.0268,-.7845,3.187;-.5351,.8018,-1.1333;-.3925,2.3409,-.241;-2.0138,1.6318,-.4866;.9117,-.8753,2.5287;1.7035,.0365,1.205;.8015,-1.4316,.8114;-.9099,1.0434,3.727;-.0754,2.3316,2.8175;-1.8518,2.1975,2.7311;-3.1728,-1.1502,3.7789;-4.9686,-1.0467,3.6874;-3.955,.3095,3.071;4.8362,-.5311,.9761;4.4833,-1.8846,.9174;3.7971,-2.484,1.9671;3.4828,-1.7153,3.0833;3.8818,-.3869,3.2018;4.5647,.1986,2.1409;4.6794,-2.448,.0047;3.4599,-3.519,1.9006;2.6024,-2.2872,4.107;3.6169,.1828,4.0932;4.8493,1.2529,2.1944;-.8314,1.1199,-4.1419;-1.9686,.3243,-4.1302;-1.8522,-1.0088,-4.5084;-.6412,-1.5464,-4.9323;.4867,-.7344,-4.947;-.8996,2.1521,-3.7891;-2.9326,.7129,-3.8006;-3.0305,-1.8771,-4.4088;-.5886,-2.5976,-5.218;1.445,-1.1566,-5.2512;2.1711,-1.5422,4.966;2.3147,-3.4628,4.0205;-2.9373,-3.0133,-4.822;-4.0328,-1.4129,-3.9022;7.1837,.9872,-1.6378;6.2424,1.4199,-2.6172;8.5739,1.1497,-1.8872;9.0215,1.6914,-3.0671;9.285,.8216,-1.1227;10.0936,1.8054,-3.2501;6.74,1.9544,-3.8386;8.0903,2.0863,-4.0572;6.0318,2.2526,-4.6149;8.4483,2.4931,-5.0072;3.7006,3.2299,-3.5615;2.6225,3.6945,-4.3708;4.6309,4.1913,-3.0745;4.5318,5.5169,-3.424;5.4332,3.8703,-2.4083;5.2607,6.2339,-3.0355;2.5558,5.0695,-4.729;3.4932,5.9637,-4.2753;1.7306,5.405,-5.3649;3.4305,7.0194,-4.5537;-4.3612,-2.6557,-.5267;-4.1942,-3.4225,-1.3017;-4.9387,-3.1,.3006;-4.9923,-1.8777,-.9946;-2.0488,-1.7178,-1.1371;-2.2946,-.7405,-1.5889;-1.0034,-1.658,-.7967;-2.0698,-2.4597,-1.9473;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648078259921</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000573886974 0.000046106336 0.025447242437 0.005334643451</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455259 -0.000061573 0.000105402 0.000137271 0.000169024 0.000196707 0.000280356 0.000319931 0.000497953 0.000532862 0.000599122 0.000696670 0.000751285 0.000774520 0.000835004 0.000939528 0.000998898 0.001087084 0.001115482 0.001175423 0.001257906 0.001325671 0.001434438 0.001574523 0.001650742 0.001928282 0.002043113 0.002134199 0.002193921 0.002372025 0.002613247 0.002981948 0.003284073 0.003365426 0.003736898 0.003883879 0.004043214 0.004406707 0.005034038 0.005351564 0.005480990 0.005894144 0.006105652 0.006483303 0.007159734 0.007603363 0.007764740 0.008193274 0.008816662 0.009338139 0.009868136 0.011045988 0.011600886 0.012741058 0.012934630 0.013305847 0.013707151 0.014594390 0.014879849 0.015200583 0.015454452 0.016017531 0.016557966 0.016791225 0.017271640 0.017713789 0.018600465 0.019220206 0.020652930 0.020788378 0.021321708 0.022419555 0.022796548 0.024001214 0.025852440 0.026332741 0.026770526 0.028272937 0.028779295 0.030553704 0.031089418 0.031404496 0.032027874 0.033347823 0.033746166 0.036802839 0.037291953 0.038892450 0.039182789 0.040749152 0.041390485 0.043662638 0.045092148 0.048233382 0.049061895 0.049440114 0.049982871 0.050952078 0.050994785 0.052107796 0.052332592 0.052392446 0.052536696 0.053392529 0.054034331 0.054636642 0.055079304 0.055820972 0.056362954 0.056457146 0.057033397 0.057665925 0.058396081 0.059528203 0.060597849 0.060827898 0.061207646 0.061769485 0.062258439 0.064890666 0.065629427 0.065740531 0.066265766 0.071243483 0.073715265 0.074347557 0.076769521 0.078598810 0.083509528 0.084158265 0.085021760 0.086195601 0.086857036 0.089579052 0.090469768 0.091939576 0.094408812 0.094642773 0.095553383 0.095826236 0.096110638 0.097373573 0.098209040 0.098888117 0.099333127 0.099914810 0.100519569 0.101438747 0.102205092 0.102983806 0.103727185 0.104374491 0.105977925 0.106076137 0.106636471 0.108412051 0.109591911 0.110478603 0.112247370 0.113029497 0.116249097 0.118119939 0.118461001 0.120947887 0.122608140 0.123395804 0.125499877 0.126257228 0.130395780 0.131556267 0.134757589 0.141536817 0.142301553 0.144787436 0.145753671 0.146386490 0.146714600 0.147052830 0.152423169 0.155224071 0.159440668 0.170446550 0.172538038 0.174907564 0.181756530 0.182640356 0.185923504 0.186594031 0.190606455 0.192520875 0.195961140 0.197603370 0.200041727 0.204694899 0.205583940 0.206729287 0.209146940 0.209612445 0.211967625 0.214672458 0.217574807 0.223855892 0.224653812 0.228937162 0.233418979 0.234044545 0.234796619 0.242993603 0.252858659 0.256485479 0.256643898 0.262645384 0.278090856 0.282222558 0.285972725 0.286946914 0.291190697 0.298390883 0.301938419 0.302919882 0.305128806 0.311830876 0.314461665 0.320525813 0.321411868 0.327174191 0.342777671 0.344593715 0.348108442 0.348923735 0.350187426 0.354272027 0.360741604 0.361445214 0.369748652 0.380257595 0.404061697 0.421641486 0.424452062 0.450429608 0.462658544 0.468594072 0.472808673 0.473758257 0.475619378 0.479432793 0.485683392 0.503436318 0.529369473 0.558005360 0.564054115 0.568017610 0.589935582 0.592091522 0.602307629 0.635341860 0.639045048 0.641832478 0.662124929 0.668188769 0.680354739 0.683648521 0.691223858 0.694102173 0.703808049 0.704695160 0.711695309 0.737808923 0.749890728 0.759262592 0.771829056 0.776571440 0.804063744 0.808658335 0.810851228 0.813145178 0.819316337 0.820435344 0.828654760 0.829401436 0.831169361 0.839406908 0.844138260 0.844895908 0.849375980 0.856925998 0.861390990 0.864546825 0.869750678 0.871096597 0.883133723 0.887374352 0.890900052 0.892332897 0.915807075 0.921885547 0.930255247 0.932035253 0.963530048 0.975087475 0.976606052 0.991198333 0.999287878 1.022697084 1.034247032 1.043464874 1.050964641 1.057925227 1.083755878 1.085394961 1.088420428 1.104693924 1.106578448 1.112035883 1.122551636 1.123465052 1.134951807 1.138925261 1.167327035 1.170524817 1.178726486 1.185383409 1.194048145 1.202717451 1.219678174 1.239338095 1.243663910 1.295233498 1.312860160 1.323316470 1.325223071 1.326410675 1.331949583 1.332978639 1.340340755 1.341691219 1.355381690 1.374673642 1.378137166 1.380925566 1.380935076 1.417933844 1.550963593 1.659882652 1.674179465</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">5</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38286589" y3="0.14621021" z3="-0.23408418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44826773" y3="0.06026717" z3="0.31290666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71891483" y3="0.3795126" z3="-0.43774323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83781746" y3="1.27191087" z3="-2.35721677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44955634" y3="0.58287309" z3="-1.21959983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76286472" y3="0.99178366" z3="-3.67565072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77639147" y3="1.82977835" z3="-3.24450245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.5865175" y3="2.79269919" z3="-4.74135453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.61133778" y3="1.46743269" z3="-4.37322811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.73169655" y3="3.18156685" z3="-5.30329289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84389313" y3="-0.3348762" z3="-3.38583567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13188372" y3="0.32549829" z3="-0.99019834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38075474" y3="-0.85889894" z3="-1.89077855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9185997" y3="-0.71659681" z3="-1.66717936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09670961" y3="-2.17350137" z3="-1.70678701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.03852521" y3="-3.76047827" z3="0.74508226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.41945916" y3="-5.20705658" z3="-4.69979573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.13147236" y3="-5.01425111" z3="-3.66229903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.60941883" y3="-4.48792902" z3="-1.04261181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.07432105" y3="-4.49733011" z3="-2.77536677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.16956402" y3="-5.29445363" z3="-3.24040952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.54035083" y3="-5.0329339" z3="-1.92321747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.71591389" y3="-4.24345109" z3="-1.44899597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.09320192" y3="-4.26715596" z3="-3.09504206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.90472462" y3="-5.69697519" z3="-3.94007616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.56701364" y3="-5.225577" z3="-1.60185335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.88596714" y3="-4.08230551" z3="0.27652517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.06278767" y3="-3.93459522" z3="0.87299519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.9057231" y3="-4.45471072" z3="0.41480535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11478792" y3="-3.76420568" z3="2.33389249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26644157" y3="-3.51569478" z3="5.12167793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29684027" y3="-4.09159677" z3="3.01393636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01172677" y3="-3.30783882" z3="3.07165918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.08415901" y3="-3.18584629" z3="4.45587319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37033006" y3="-3.97133974" z3="4.39898661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.16275024" y3="-4.45058122" z3="2.45057881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06816749" y3="-3.05393461" z3="2.58244995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.20162232" y3="-2.84845063" z3="5.00676563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29450923" y3="-4.23984697" z3="4.91806793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.32224656" y3="-3.42794736" z3="6.2103272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55048628" y3="-3.76824411" z3="-0.51677991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.26112057" y3="-3.17308333" z3="-0.9501507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.41621485" y3="0.59595845" z3="-4.53079464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04170289" y3="-2.07147212" z3="-0.06428346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.02933766" y3="-1.33246151" z3="1.11590079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.0439931" y3="-0.62599026" z3="1.56181322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.72021756" y3="0.47425144" z3="1.30530557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.94517018" y3="1.390839" z3="-0.29981946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.81271272" y3="-0.56072523" z3="1.47269125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.90199119" y3="1.61607399" z3="2.7795366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.07948725" y3="-1.41195274" z3="1.9217508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.02384306" y3="-0.77799668" z3="3.18943192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.52796255" y3="0.80250262" z3="-1.13505505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.38336086" y3="2.34184076" z3="-0.24273692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.00585982" y3="1.63485252" z3="-0.48879392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.91296073" y3="-0.88416892" z3="2.52236868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.70724469" y3="0.02629139" z3="1.19918347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.7968115" y3="-1.43643421" z3="0.80389153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.8962405" y3="1.04592672" z3="3.72544006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.05989424" y3="2.33119091" z3="2.81335046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.83684191" y3="2.20236404" z3="2.73101833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.1700701" y3="-1.14490409" z3="3.78086266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.96577337" y3="-1.03937296" z3="3.68994362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.95070397" y3="0.31598678" z3="3.07387351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83545859" y3="-0.53370165" z3="0.97603638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.48151123" y3="-1.88691902" z3="0.91638531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79595151" y3="-2.4867531" z3="1.96619743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.48318155" y3="-1.71877082" z3="3.08336735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.88306631" y3="-0.39076922" z3="3.20262962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.56552553" y3="0.19515289" z3="2.14165647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.6762334" y3="-2.44958844" z3="0.00288645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45796822" y3="-3.5214582" z3="1.89921386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.60335939" y3="-2.29089822" z3="4.10741849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.61926741" y3="0.17833967" z3="4.09469386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.8509542" y3="1.24916897" z3="2.19588999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83146465" y3="1.10915084" z3="-4.14368468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.9665289" y3="0.31051654" z3="-4.13476679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.8465327" y3="-1.02095838" z3="-4.5175831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.63407025" y3="-1.55397754" z3="-4.94294924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.49180799" y3="-0.73911404" z3="-4.95414488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.90240204" y3="2.14004226" z3="-3.78776325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93175376" y3="0.69545884" z3="-3.80442672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.02282332" y3="-1.89235959" z3="-4.42287907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.5789747" y3="-2.60383841" z3="-5.23280171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.45137925" y3="-1.15789195" z3="-5.25921026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17231057" y3="-1.54609464" z3="4.96659299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31589142" y3="-3.46646774" z3="4.02100313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.92872199" y3="-3.02432117" z3="-4.84742215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.02473237" y3="-1.43476912" z3="-3.90943947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.18217981" y3="0.99020691" z3="-1.63538249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.24084448" y3="1.42208286" z3="-2.61507214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.57227016" y3="1.15560812" z3="-1.88359477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01966177" y3="1.6995474" z3="-3.06252995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28344712" y3="0.82818819" z3="-1.11890959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.09168635" y3="1.81579994" z3="-3.24463417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73819459" y3="1.95890103" z3="-3.83548373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.08839157" y3="2.09368391" z3="-4.05288399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02998127" y3="2.25662629" z3="-4.61193431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.44638422" y3="2.50226088" z3="-5.00212016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.6959864" y3="3.22876152" z3="-3.55782584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.61698115" y3="3.69277972" z3="-4.36625379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.62422963" y3="4.1911203" z3="-3.06877313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.52234112" y3="5.51728337" z3="-3.41554943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.42713644" y3="3.87048911" z3="-2.4031725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.24971401" y3="6.23497019" z3="-3.0255254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.54734355" y3="5.0682986" z3="-4.72161732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.48282811" y3="5.96357821" z3="-4.26597031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.72150164" y3="5.40338227" z3="-5.35684642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.41793005" y3="7.01971928" z3="-4.54214477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.36055179" y3="-2.64614937" z3="-0.52621501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.19441617" y3="-3.4130339" z3="-1.30134548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.93989379" y3="-3.0893536" z3="0.30026984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.98971985" y3="-1.86671797" z3="-0.9943437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.04597146" y3="-1.71185989" z3="-1.13431393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29139245" y3="-0.73540343" z3="-1.58815156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00097795" y3="-1.65132175" z3="-0.79210243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.06519277" y3="-2.45440643" z3="-1.94387159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3829,.1462,-.2341;7.4483,.0603,.3129;6.7189,.3795,-.4377;4.8378,1.2719,-2.3572;4.4496,.5829,-1.2196;2.7629,.9918,-3.6757;3.7764,1.8298,-3.2445;1.5865,2.7927,-4.7414;1.6113,1.4674,-4.3732;.7317,3.1816,-5.3033;2.8439,-.3349,-3.3858;3.1319,.3255,-.9902;2.3808,-.8589,-1.8908;.9186,-.7166,-1.6672;3.0967,-2.1735,-1.7068;-.0385,-3.7605,.7451;.4195,-5.2071,-4.6998;.1315,-5.0143,-3.6623;-.6094,-4.4879,-1.0426;1.0743,-4.4973,-2.7754;-1.1696,-5.2945,-3.2404;-1.5404,-5.0329,-1.9232;.7159,-4.2435,-1.449;2.0932,-4.2672,-3.095;-1.9047,-5.697,-3.9401;-2.567,-5.2256,-1.6019;-.886,-4.0823,.2765;-2.0628,-3.9346,.873;-2.9057,-4.4547,.4148;-2.1148,-3.7642,2.3339;-2.2664,-3.5157,5.1217;-3.2968,-4.0916,3.0139;-1.0117,-3.3078,3.0717;-1.0842,-3.1858,4.4559;-3.3703,-3.9713,4.399;-4.1628,-4.4506,2.4506;-.0682,-3.0539,2.5824;-.2016,-2.8485,5.0068;-4.2945,-4.2398,4.9181;-2.3222,-3.4279,6.2103;1.5505,-3.7682,-.5168;2.2611,-3.1731,-.9502;.4162,.596,-4.5308;-3.0417,-2.0715,-.0643;-3.0293,-1.3325,1.1159;-2.044,-.626,1.5618;-.7202,.4743,1.3053;-.9452,1.3908,-.2998;.8127,-.5607,1.4727;-.902,1.6161,2.7795;-4.0795,-1.412,1.9218;-4.0238,-.778,3.1894;-.528,.8025,-1.1351;-.3834,2.3418,-.2427;-2.0059,1.6349,-.4888;.913,-.8842,2.5224;1.7072,.0263,1.1992;.7968,-1.4364,.8039;-.8962,1.0459,3.7254;-.0599,2.3312,2.8134;-1.8368,2.2024,2.731;-3.1701,-1.1449,3.7809;-4.9658,-1.0394,3.6899;-3.9507,.316,3.0739;4.8355,-.5337,.976;4.4815,-1.8869,.9164;3.796,-2.4868,1.9662;3.4832,-1.7188,3.0834;3.8831,-.3908,3.2026;4.5655,.1952,2.1417;4.6762,-2.4496,.0029;3.458,-3.5215,1.8992;2.6034,-2.2909,4.1074;3.6193,.1783,4.0947;4.851,1.2492,2.1959;-.8315,1.1092,-4.1437;-1.9665,.3105,-4.1348;-1.8465,-1.021,-4.5176;-.6341,-1.554,-4.9429;.4918,-.7391,-4.9541;-.9024,2.14,-3.7878;-2.9318,.6955,-3.8044;-3.0228,-1.8924,-4.4229;-.579,-2.6038,-5.2328;1.4514,-1.1579,-5.2592;2.1723,-1.5461,4.9666;2.3159,-3.4665,4.021;-2.9287,-3.0243,-4.8474;-4.0247,-1.4348,-3.9094;7.1822,.9902,-1.6354;6.2408,1.4221,-2.6151;8.5723,1.1556,-1.8836;9.0197,1.6995,-3.0625;9.2834,.8282,-1.1189;10.0917,1.8158,-3.2446;6.7382,1.9589,-3.8355;8.0884,2.0937,-4.0529;6.03,2.2566,-4.6119;8.4464,2.5023,-5.0021;3.696,3.2288,-3.5578;2.617,3.6928,-4.3663;4.6242,4.1911,-3.0688;4.5223,5.5173,-3.4155;5.4271,3.8705,-2.4032;5.2497,6.235,-3.0255;2.5473,5.0683,-4.7216;3.4828,5.9636,-4.266;1.7215,5.4034,-5.3568;3.4179,7.0197,-4.5421;-4.3606,-2.6461,-.5262;-4.1944,-3.413,-1.3013;-4.9399,-3.0894,.3003;-4.9897,-1.8667,-.9943;-2.046,-1.7119,-1.1343;-2.2914,-.7354,-1.5882;-1.001,-1.6513,-.7921;-2.0652,-2.4544,-1.9439;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648080192554</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000420863944 0.000043245670 0.035498412833 0.005345495252</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455265 -0.000074653 0.000105423 0.000138636 0.000170152 0.000198562 0.000281219 0.000319808 0.000498109 0.000532961 0.000628545 0.000711972 0.000755812 0.000777644 0.000836077 0.000939528 0.000999389 0.001087184 0.001115584 0.001178307 0.001257920 0.001328361 0.001435162 0.001574709 0.001651503 0.001928441 0.002044685 0.002134186 0.002195872 0.002372394 0.002613688 0.002985745 0.003284437 0.003370673 0.003773199 0.003886917 0.004044860 0.004406901 0.005038878 0.005351594 0.005481030 0.005895131 0.006106336 0.006483268 0.007162854 0.007604990 0.007765058 0.008194541 0.008816812 0.009338157 0.009868387 0.011046277 0.011600878 0.012741786 0.012935975 0.013306439 0.013707224 0.014594387 0.014880339 0.015200891 0.015454697 0.016017520 0.016557937 0.016791204 0.017271636 0.017713781 0.018600481 0.019220204 0.020653449 0.020788989 0.021321684 0.022419557 0.022796544 0.024001207 0.025852440 0.026332815 0.026770522 0.028272939 0.028779347 0.030553702 0.031089561 0.031405145 0.032028284 0.033348157 0.033746325 0.036802995 0.037291960 0.038892645 0.039184094 0.040749265 0.041390473 0.043662852 0.045092169 0.048233430 0.049062007 0.049440276 0.049983139 0.050952069 0.050994771 0.052107798 0.052332591 0.052392446 0.052536712 0.053392714 0.054034376 0.054636637 0.055079378 0.055820978 0.056362971 0.056457144 0.057033432 0.057665945 0.058396152 0.059528207 0.060597832 0.060827894 0.061207627 0.061769687 0.062258460 0.064890722 0.065629466 0.065740528 0.066265771 0.071243482 0.073715301 0.074347574 0.076769596 0.078598821 0.083509552 0.084158277 0.085022160 0.086195617 0.086857012 0.089579059 0.090469755 0.091939591 0.094408826 0.094642773 0.095553430 0.095826237 0.096110632 0.097373625 0.098209057 0.098888149 0.099333505 0.099915460 0.100519558 0.101439056 0.102205266 0.102983820 0.103727239 0.104374512 0.105978280 0.106076368 0.106636809 0.108414029 0.109592442 0.110478640 0.112247369 0.113029517 0.116249115 0.118119939 0.118461115 0.120948192 0.122608112 0.123395831 0.125499952 0.126257215 0.130395977 0.131556262 0.134757616 0.141536851 0.142301554 0.144787367 0.145753968 0.146386478 0.146714569 0.147052743 0.152423151 0.155224061 0.159440715 0.170446556 0.172538076 0.174907564 0.181756547 0.182640359 0.185923496 0.186594248 0.190606454 0.192521239 0.195961168 0.197603359 0.200042151 0.204694999 0.205583940 0.206729288 0.209146938 0.209612447 0.211967624 0.214672838 0.217574805 0.223855895 0.224653816 0.228937162 0.233418994 0.234044546 0.234796653 0.242993614 0.252858699 0.256485629 0.256643958 0.262645399 0.278090855 0.282222558 0.285972729 0.286946936 0.291190696 0.298390900 0.301938458 0.302919977 0.305128806 0.311830879 0.314461675 0.320525856 0.321411870 0.327174212 0.342777751 0.344593834 0.348108507 0.348924986 0.350187754 0.354272031 0.360741668 0.361445219 0.369749650 0.380259250 0.404061985 0.421641483 0.424453224 0.450429609 0.462660291 0.468594086 0.472808710 0.473762725 0.475619439 0.479434231 0.485683453 0.503438740 0.529371410 0.558006673 0.564055040 0.568019878 0.589936699 0.592091724 0.602307750 0.635341912 0.639045143 0.641832562 0.662125482 0.668189584 0.680354743 0.683648652 0.691223912 0.694102397 0.703808050 0.704695208 0.711695489 0.737809051 0.749890731 0.759262597 0.771829058 0.776571448 0.804064373 0.808658360 0.810853214 0.813145177 0.819316580 0.820435707 0.828654998 0.829401653 0.831170492 0.839408745 0.844138362 0.844895908 0.849376042 0.856928603 0.861391717 0.864546834 0.869750861 0.871096778 0.883135083 0.887374353 0.890900060 0.892332942 0.915807256 0.921885551 0.930255255 0.932035255 0.963531180 0.975087644 0.976606122 0.991198391 0.999287877 1.022697157 1.034247035 1.043465425 1.050964995 1.057925719 1.083755878 1.085394986 1.088420435 1.104694205 1.106578449 1.112035883 1.122551636 1.123465055 1.134952031 1.138925774 1.167327040 1.170524818 1.178726488 1.185384137 1.194048148 1.202717464 1.219679528 1.239361073 1.243697460 1.295233505 1.312860630 1.323316692 1.325224066 1.326410883 1.331953930 1.332979797 1.340340983 1.341691288 1.355382203 1.374673641 1.378137299 1.380925699 1.380935088 1.417938046 1.550963590 1.659883068 1.674185192</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">6</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38272494" y3="0.14547942" z3="-0.23299072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44805257" y3="0.06283686" z3="0.31475536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71844943" y3="0.38120322" z3="-0.43603083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83653921" y3="1.27171967" z3="-2.35551556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44898488" y3="0.58106613" z3="-1.21862274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76232548" y3="0.98994531" z3="-3.67466883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77451196" y3="1.82896106" z3="-3.24246373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.58317231" y3="2.79023221" z3="-4.73842205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.61040305" y3="1.46453555" z3="-4.37221812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.7277934" y3="3.17828643" z3="-5.30008016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84493184" y3="-0.33687328" z3="-3.38591206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13165841" y3="0.32161953" z3="-0.98968588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38126625" y3="-0.86235334" z3="-1.89155964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91898695" y3="-0.72073104" z3="-1.6681528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09724201" y3="-2.17705169" z3="-1.7083449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.04058825" y3="-3.75854093" z3="0.7441508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.41091912" y3="-5.20460083" z3="-4.70151624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.12415307" y3="-5.01163249" z3="-3.66372797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.6136835" y3="-4.48502296" z3="-1.04331178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.06861459" y3="-4.4967621" z3="-2.77735932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.17703928" y3="-5.28988111" z3="-3.2409269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.54625147" y3="-5.02822574" z3="-1.92334966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.71176555" y3="-4.24285746" z3="-1.45057253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.08764821" y3="-4.26826417" z3="-3.09774889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.91327573" y3="-5.69121938" z3="-3.94012453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.57292276" y3="-5.2194604" z3="-1.601149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.88869062" y3="-4.07916038" z3="0.27602567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.06508402" y3="-3.93062437" z3="0.87319345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.90842347" y3="-4.45009188" z3="0.41537699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11622707" y3="-3.76081031" z3="2.33418667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26677801" y3="-3.51376818" z3="5.12209528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29907769" y3="-4.0855025" z3="3.01417457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0118744" y3="-3.30766248" z3="3.0719975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.08379971" y3="-3.1863731" z3="4.45630523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37200521" y3="-3.96606507" z3="4.39931427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.16607545" y3="-4.44137899" z3="2.45042386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0676693" y3="-3.05592296" z3="2.58286838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.20033512" y3="-2.85149978" z3="5.00725742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29675856" y3="-4.23256622" z3="4.91841681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.32211754" y3="-3.42670312" z3="6.21081633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.54800967" y3="-3.76981852" z3="-0.5187518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25974889" y3="-3.17617451" z3="-0.95220661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.41778048" y3="0.59031165" z3="-4.53296577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04348941" y3="-2.06719999" z3="-0.06274621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.02722448" y3="-1.32756855" z3="1.11705677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.03940985" y3="-0.62343355" z3="1.56113568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.71404106" y3="0.4750296" z3="1.30486511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.93760827" y3="1.39136087" z3="-0.30050244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.81804898" y3="-0.56108984" z3="1.47418035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.89403586" y3="1.61773421" z3="2.77879639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.07638228" y3="-1.40427131" z3="1.92451865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.01748271" y3="-0.77050695" z3="3.19215353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.52557582" y3="0.80024105" z3="-1.13615367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.37019361" y3="2.33899702" z3="-0.24552125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.99720635" y3="1.64129097" z3="-0.48704774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.91648463" y3="-0.8844207" z3="2.52405185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.71306305" y3="0.02604576" z3="1.20227996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80392378" y3="-1.43699244" z3="0.80565975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.88930175" y3="1.04776035" z3="3.72481929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.05041189" y3="2.33112548" z3="2.81249105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.82770387" y3="2.2059602" z3="2.73031467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.16382756" y3="-1.13950471" z3="3.78244382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.95938161" y3="-1.02968349" z3="3.69389568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.94197109" y3="0.32330154" z3="3.07654618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83622351" y3="-0.53547864" z3="0.97693056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.48077722" y3="-1.8882559" z3="0.91595256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79589676" y3="-2.48871992" z3="1.96582258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.48536868" y3="-1.72188643" z3="3.08442276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.88699804" y3="-0.39452221" z3="3.20502108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.56875635" y3="0.19207605" z3="2.14394771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.67363895" y3="-2.44991054" z3="0.00142171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45662574" y3="-3.52294815" z3="1.89782988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.60554603" y3="-2.29420099" z3="4.10838367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.62485787" y3="0.17372962" z3="4.09812852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.85537444" y3="1.24572544" z3="2.19921451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83157661" y3="1.09804305" z3="-4.14415188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.96421239" y3="0.29582585" z3="-4.13947308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.84006847" y3="-1.03332256" z3="-4.52915061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.62576893" y3="-1.56067176" z3="-4.95636248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.49782133" y3="-0.74260445" z3="-4.96226547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.90572718" y3="2.12723338" z3="-3.78387554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93086565" y3="0.67628765" z3="-3.80803273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.01417956" y3="-1.90846995" z3="-4.44188679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.5677577" y3="-2.60869575" z3="-5.25223867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.45892957" y3="-1.15701077" z3="-5.26858379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1768333" y3="-1.55012032" z3="4.96939556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31564029" y3="-3.46912391" z3="4.02000271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.91940444" y3="-3.03422744" z3="-4.88292056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.01515899" y3="-1.45979369" z3="-3.91850123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1811386" y3="0.9932322" z3="-1.63319536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23940573" y3="1.42425338" z3="-2.61288107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.57104666" y3="1.16089837" z3="-1.88089716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01793476" y3="1.7062509" z3="-3.05936285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.2825053" y3="0.83406984" z3="-1.11621474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.08983399" y3="1.82422475" z3="-3.24109876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73627172" y3="1.96265135" z3="-3.8327902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0863292" y3="2.09961925" z3="-4.04971721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02782804" y3="2.25981154" z3="-4.60925752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.44397011" y3="2.50934521" z3="-4.99858621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.69203367" y3="3.22815198" z3="-3.55438403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.61219018" y3="3.69148374" z3="-4.36211143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.61902205" y3="4.19132458" z3="-3.06456543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.51521714" y3="5.51767269" z3="-3.41000107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.42255645" y3="3.8711697" z3="-2.39949609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.24172513" y3="6.23595829" z3="-3.01948195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.54051271" y3="5.06725151" z3="-4.71600682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.47486922" y3="5.96336812" z3="-4.25970412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.71408643" y3="5.40180432" z3="-5.35075642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.40845558" y3="7.01966864" z3="-4.53484726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.36447155" y3="-2.64090011" z3="-0.51997601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.20165625" y3="-3.40909676" z3="-1.29450318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.94162981" y3="-3.08236941" z3="0.30903918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99417698" y3="-1.86136567" z3="-0.9872859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05083328" y3="-1.70951433" z3="-1.13625866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29577865" y3="-0.73248639" z3="-1.58897121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00449361" y3="-1.65163944" z3="-0.79816552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.07507549" y3="-2.45190267" z3="-1.9458102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3827,.1455,-.233;7.4481,.0628,.3148;6.7184,.3812,-.436;4.8365,1.2717,-2.3555;4.449,.5811,-1.2186;2.7623,.9899,-3.6747;3.7745,1.829,-3.2425;1.5832,2.7902,-4.7384;1.6104,1.4645,-4.3722;.7278,3.1783,-5.3001;2.8449,-.3369,-3.3859;3.1317,.3216,-.9897;2.3813,-.8624,-1.8916;.919,-.7207,-1.6682;3.0972,-2.1771,-1.7083;-.0406,-3.7585,.7442;.4109,-5.2046,-4.7015;.1242,-5.0116,-3.6637;-.6137,-4.485,-1.0433;1.0686,-4.4968,-2.7774;-1.177,-5.2899,-3.2409;-1.5463,-5.0282,-1.9233;.7118,-4.2429,-1.4506;2.0876,-4.2683,-3.0977;-1.9133,-5.6912,-3.9401;-2.5729,-5.2195,-1.6011;-.8887,-4.0792,.276;-2.0651,-3.9306,.8732;-2.9084,-4.4501,.4154;-2.1162,-3.7608,2.3342;-2.2668,-3.5138,5.1221;-3.2991,-4.0855,3.0142;-1.0119,-3.3077,3.072;-1.0838,-3.1864,4.4563;-3.372,-3.9661,4.3993;-4.1661,-4.4414,2.4504;-.0677,-3.0559,2.5829;-.2003,-2.8515,5.0073;-4.2968,-4.2326,4.9184;-2.3221,-3.4267,6.2108;1.548,-3.7698,-.5188;2.2597,-3.1762,-.9522;.4178,.5903,-4.533;-3.0435,-2.0672,-.0627;-3.0272,-1.3276,1.1171;-2.0394,-.6234,1.5611;-.714,.475,1.3049;-.9376,1.3914,-.3005;.818,-.5611,1.4742;-.894,1.6177,2.7788;-4.0764,-1.4043,1.9245;-4.0175,-.7705,3.1922;-.5256,.8002,-1.1362;-.3702,2.339,-.2455;-1.9972,1.6413,-.487;.9165,-.8844,2.5241;1.7131,.026,1.2023;.8039,-1.437,.8057;-.8893,1.0478,3.7248;-.0504,2.3311,2.8125;-1.8277,2.206,2.7303;-3.1638,-1.1395,3.7824;-4.9594,-1.0297,3.6939;-3.942,.3233,3.0765;4.8362,-.5355,.9769;4.4808,-1.8883,.916;3.7959,-2.4887,1.9658;3.4854,-1.7219,3.0844;3.887,-.3945,3.205;4.5688,.1921,2.1439;4.6736,-2.4499,.0014;3.4566,-3.5229,1.8978;2.6055,-2.2942,4.1084;3.6249,.1737,4.0981;4.8554,1.2457,2.1992;-.8316,1.098,-4.1442;-1.9642,.2958,-4.1395;-1.8401,-1.0333,-4.5292;-.6258,-1.5607,-4.9564;.4978,-.7426,-4.9623;-.9057,2.1272,-3.7839;-2.9309,.6763,-3.808;-3.0142,-1.9085,-4.4419;-.5678,-2.6087,-5.2522;1.4589,-1.157,-5.2686;2.1768,-1.5501,4.9694;2.3156,-3.4691,4.02;-2.9194,-3.0342,-4.8829;-4.0152,-1.4598,-3.9185;7.1811,.9932,-1.6332;6.2394,1.4243,-2.6129;8.571,1.1609,-1.8809;9.0179,1.7063,-3.0594;9.2825,.8341,-1.1162;10.0898,1.8242,-3.2411;6.7363,1.9627,-3.8328;8.0863,2.0996,-4.0497;6.0278,2.2598,-4.6093;8.444,2.5093,-4.9986;3.692,3.2282,-3.5544;2.6122,3.6915,-4.3621;4.619,4.1913,-3.0646;4.5152,5.5177,-3.41;5.4226,3.8712,-2.3995;5.2417,6.236,-3.0195;2.5405,5.0673,-4.716;3.4749,5.9634,-4.2597;1.7141,5.4018,-5.3508;3.4085,7.0197,-4.5348;-4.3645,-2.6409,-.52;-4.2017,-3.4091,-1.2945;-4.9416,-3.0824,.309;-4.9942,-1.8614,-.9873;-2.0508,-1.7095,-1.1363;-2.2958,-.7325,-1.589;-1.0045,-1.6516,-.7982;-2.0751,-2.4519,-1.9458;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648084201730</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001165425857 0.000084384724 0.029304059135 0.005346671407</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455295 -0.000083394 0.000105368 0.000138970 0.000169528 0.000198717 0.000281053 0.000320201 0.000498088 0.000533421 0.000640818 0.000720825 0.000757597 0.000779189 0.000836342 0.000939511 0.001000267 0.001087148 0.001116142 0.001179524 0.001257942 0.001328347 0.001435154 0.001575765 0.001651715 0.001928611 0.002046840 0.002134527 0.002198123 0.002372764 0.002613850 0.002988538 0.003285102 0.003370135 0.003805148 0.003895023 0.004047698 0.004407757 0.005042389 0.005351623 0.005482337 0.005897419 0.006107546 0.006483412 0.007165406 0.007606439 0.007765048 0.008195566 0.008816875 0.009338182 0.009868539 0.011046328 0.011600873 0.012742716 0.012937255 0.013307187 0.013707297 0.014594362 0.014880867 0.015201254 0.015454983 0.016017515 0.016557909 0.016791188 0.017271687 0.017713776 0.018600514 0.019220197 0.020653686 0.020789353 0.021321677 0.022419558 0.022796536 0.024001203 0.025852440 0.026332854 0.026770519 0.028272939 0.028779438 0.030553698 0.031089653 0.031405583 0.032028470 0.033348245 0.033746462 0.036803160 0.037291971 0.038892708 0.039185094 0.040749293 0.041390466 0.043662959 0.045092195 0.048233462 0.049062077 0.049440361 0.049983261 0.050952067 0.050994762 0.052107800 0.052332590 0.052392445 0.052536750 0.053392874 0.054034467 0.054636636 0.055079380 0.055820998 0.056362991 0.056457145 0.057033476 0.057665933 0.058396178 0.059528203 0.060597826 0.060827889 0.061207616 0.061769887 0.062258467 0.064890811 0.065629460 0.065740539 0.066265750 0.071243483 0.073715328 0.074347584 0.076769676 0.078598820 0.083509553 0.084158280 0.085022531 0.086195615 0.086856997 0.089579054 0.090469742 0.091939585 0.094408821 0.094642780 0.095553441 0.095826233 0.096110626 0.097373690 0.098209069 0.098888209 0.099333648 0.099915799 0.100519646 0.101439126 0.102205364 0.102983848 0.103727306 0.104374531 0.105978513 0.106076450 0.106637044 0.108415208 0.109592595 0.110478708 0.112247367 0.113029519 0.116249109 0.118119927 0.118461128 0.120948285 0.122608191 0.123395834 0.125499945 0.126257267 0.130396198 0.131556267 0.134757631 0.141536846 0.142301584 0.144787563 0.145753874 0.146386535 0.146714446 0.147053105 0.152423106 0.155224276 0.159440712 0.170446557 0.172538095 0.174907562 0.181756565 0.182640364 0.185923529 0.186594287 0.190606454 0.192521307 0.195961166 0.197603386 0.200042568 0.204694990 0.205583939 0.206729289 0.209146934 0.209612452 0.211967723 0.214672798 0.217574810 0.223855911 0.224653817 0.228937165 0.233418996 0.234044546 0.234796650 0.242993628 0.252858750 0.256485663 0.256643948 0.262645396 0.278090857 0.282222562 0.285972730 0.286946943 0.291190697 0.298390962 0.301938516 0.302920006 0.305128814 0.311830877 0.314461677 0.320525891 0.321411881 0.327174232 0.342777855 0.344594342 0.348108525 0.348925900 0.350187747 0.354272040 0.360741675 0.361445274 0.369750922 0.380260035 0.404063022 0.421641608 0.424453510 0.450429626 0.462661231 0.468594111 0.472812547 0.473762598 0.475619440 0.479436211 0.485683525 0.503439713 0.529372635 0.558011360 0.564055407 0.568020938 0.589937722 0.592091736 0.602307773 0.635341957 0.639045218 0.641833070 0.662126065 0.668189954 0.680354966 0.683648660 0.691223946 0.694102391 0.703808053 0.704695253 0.711695954 0.737809148 0.749890733 0.759262597 0.771829058 0.776571453 0.804064407 0.808658359 0.810853485 0.813145187 0.819316730 0.820435758 0.828654994 0.829402108 0.831170520 0.839408826 0.844138381 0.844895917 0.849376062 0.856928913 0.861391728 0.864546858 0.869750905 0.871096909 0.883135162 0.887374356 0.890900098 0.892333110 0.915807490 0.921885554 0.930255305 0.932035293 0.963531230 0.975087657 0.976606122 0.991198475 0.999287877 1.022697158 1.034247050 1.043465431 1.050964992 1.057925726 1.083755880 1.085395076 1.088420437 1.104694204 1.106578451 1.112035884 1.122551636 1.123465056 1.134952030 1.138925791 1.167327039 1.170524838 1.178726488 1.185384223 1.194048149 1.202717462 1.219680371 1.239365174 1.243756715 1.295233583 1.312860659 1.323316695 1.325224112 1.326410907 1.331959838 1.332980232 1.340340983 1.341691428 1.355382207 1.374673650 1.378137410 1.380925696 1.380935101 1.417938116 1.550963588 1.659883072 1.674193401</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">7</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38253622" y3="0.14395836" z3="-0.2321567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44781135" y3="0.0643768" z3="0.31626241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71795384" y3="0.38199511" z3="-0.4345954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83526241" y3="1.27099185" z3="-2.35393313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.448409" y3="0.57861801" z3="-1.21785229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76207631" y3="0.98730262" z3="-3.67409351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77259245" y3="1.82756591" z3="-3.24050239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.57954543" y3="2.78695762" z3="-4.73518603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60953764" y3="1.46064631" z3="-4.37141453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.72351938" y3="3.17418221" z3="-5.29643695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84691913" y3="-0.33969218" z3="-3.3865677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13143266" y3="0.31702111" z3="-0.98954576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38202418" y3="-0.8664478" z3="-1.89307239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91953218" y3="-0.72493289" z3="-1.67084655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09775291" y3="-2.18128373" z3="-1.71002876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.04259132" y3="-3.75632738" z3="0.74299224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.40372272" y3="-5.20309526" z3="-4.70288901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.11777457" y3="-5.00945947" z3="-3.66501113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.61797034" y3="-4.48136654" z3="-1.04430855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.06377237" y3="-4.4971758" z3="-2.77882768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.18404297" y3="-5.28437369" z3="-3.24195253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.55218684" y3="-5.02197575" z3="-1.92424204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.70796071" y3="-4.24255118" z3="-1.45190839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.08331486" y3="-4.27133554" z3="-3.09945167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.92146317" y3="-5.68358408" z3="-3.94110901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.57923478" y3="-5.21066309" z3="-1.60178617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.89152918" y3="-4.07540659" z3="0.27529964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.06729887" y3="-3.92562097" z3="0.87345364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.91167001" y3="-4.44379091" z3="0.41597532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11709256" y3="-3.75712145" z3="2.33472514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26520565" y3="-3.51188049" z3="5.12304903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.29959926" y3="-4.08124948" z3="3.01549492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01165519" y3="-3.30593765" z3="3.07210825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.082357" y3="-3.18552599" z3="4.45657176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37137475" y3="-3.96258134" z3="4.40077425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.16728227" y3="-4.43647734" z3="2.45251272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06749319" y3="-3.05520136" z3="2.58246056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.19809874" y3="-2.85215244" z3="5.00714521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29600063" y3="-4.22850591" z3="4.92034582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.3196604" y3="-3.42538409" z3="6.21187008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.54582594" y3="-3.77198948" z3="-0.52024953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25862564" y3="-3.17979407" z3="-0.95373753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.41953083" y3="0.58353129" z3="-4.53559765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04404488" y3="-2.06042664" z3="-0.06011284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.0258403" y3="-1.32121675" z3="1.11997154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.03732591" y3="-0.61751475" z3="1.56286851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.7091936" y3="0.47716356" z3="1.30453992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.93094933" y3="1.39305391" z3="-0.30136574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.81962421" y3="-0.56382196" z3="1.4721502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.88542862" y3="1.6210988" z3="2.77788724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.07393503" y3="-1.39747179" z3="1.92876874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.01239995" y3="-0.76482781" z3="3.19685897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.5192471" y3="0.80067448" z3="-1.13651243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.36224623" y3="2.34014239" z3="-0.24655714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.99032293" y3="1.64426994" z3="-0.48864786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.91785999" y3="-0.88864695" z3="2.52159031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.71641583" y3="0.02042405" z3="1.20005525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80131514" y3="-1.43881042" z3="0.8024458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.88132364" y3="1.05173877" z3="3.72427801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.04039829" y3="2.33284814" z3="2.81055098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.81798031" y3="2.21112489" z3="2.72953442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.15854637" y3="-1.13576504" z3="3.78568022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.95403986" y3="-1.02291596" z3="3.69962531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.93519297" y3="0.3289448" z3="3.08205512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83662701" y3="-0.53791061" z3="0.97749501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.48006285" y3="-1.89034968" z3="0.91551219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79553689" y3="-2.49126166" z3="1.96534752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.48639811" y3="-1.72521021" z3="3.08486045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.88915762" y3="-0.39829167" z3="3.20640417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.57067303" y3="0.18873874" z3="2.14540623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.67172342" y3="-2.45127881" z3="0.00028748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45544199" y3="-3.5251734" z3="1.89668312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.60684883" y3="-2.29774316" z3="4.10892084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.62817466" y3="0.16931412" z3="4.10025238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.8582546" y3="1.24208242" z3="2.20147612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83174309" y3="1.0859555" z3="-4.14620283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.96195549" y3="0.28026043" z3="-4.14600681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.83342392" y3="-1.04680236" z3="-4.5411557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.61704613" y3="-1.56869776" z3="-4.96900853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.50416952" y3="-0.74741992" z3="-4.96987075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.9093685" y3="2.11358565" z3="-3.78227539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.93024487" y3="0.65650765" z3="-3.81456306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.00538368" y3="-1.92546253" z3="-4.46100185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.55580628" y3="-2.61503272" z3="-5.26981444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.46687213" y3="-1.15764656" z3="-5.27678294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17860119" y3="-1.55392313" z3="4.970312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31669189" y3="-3.47250099" z3="4.02025959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.90836451" y3="-3.04641406" z3="-4.91222462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.00708059" y3="-1.48401184" z3="-3.93348433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.18006653" y3="0.9955247" z3="-1.63122037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23793248" y3="1.4259518" z3="-2.61078002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56977798" y3="1.16542331" z3="-1.87850424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01610098" y3="1.71241582" z3="-3.05643311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28156887" y3="0.83898088" z3="-1.1139645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.0878632" y3="1.83206408" z3="-3.23787562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73423262" y3="1.96622333" z3="-3.830093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.08413128" y3="2.10533672" z3="-4.0466291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0254896" y3="2.26305176" z3="-4.60642358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.44137318" y3="2.51641825" z3="-4.99506716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.68762439" y3="3.22704141" z3="-3.55046307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.60677631" y3="3.68962872" z3="-4.35728605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.6130709" y3="4.1911079" z3="-3.05947931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.50687968" y3="5.51778903" z3="-3.402971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.41735489" y3="3.87135922" z3="-2.39511599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.23228958" y3="6.23676543" z3="-3.01166933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.53257157" y3="5.06582361" z3="-4.70906967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.4654947" y3="5.96291006" z3="-4.25170742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.70543011" y3="5.39987703" z3="-5.34315337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.39718054" y3="7.01950459" z3="-4.52531526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.36636006" y3="-2.63175638" z3="-0.51643328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.2056965" y3="-3.398067" z3="-1.29314532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.94265346" y3="-3.07460952" z3="0.31231322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99645563" y3="-1.85050775" z3="-0.98022495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05183386" y3="-1.70296997" z3="-1.13419738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29753343" y3="-0.72643044" z3="-1.58766862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0054349" y3="-1.64444151" z3="-0.79609628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.07582038" y3="-2.44539093" z3="-1.94359386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3825,.144,-.2322;7.4478,.0644,.3163;6.718,.382,-.4346;4.8353,1.271,-2.3539;4.4484,.5786,-1.2179;2.7621,.9873,-3.6741;3.7726,1.8276,-3.2405;1.5795,2.787,-4.7352;1.6095,1.4606,-4.3714;.7235,3.1742,-5.2964;2.8469,-.3397,-3.3866;3.1314,.317,-.9895;2.382,-.8664,-1.8931;.9195,-.7249,-1.6708;3.0978,-2.1813,-1.71;-.0426,-3.7563,.743;.4037,-5.2031,-4.7029;.1178,-5.0095,-3.665;-.618,-4.4814,-1.0443;1.0638,-4.4972,-2.7788;-1.184,-5.2844,-3.242;-1.5522,-5.022,-1.9242;.708,-4.2426,-1.4519;2.0833,-4.2713,-3.0995;-1.9215,-5.6836,-3.9411;-2.5792,-5.2107,-1.6018;-.8915,-4.0754,.2753;-2.0673,-3.9256,.8735;-2.9117,-4.4438,.416;-2.1171,-3.7571,2.3347;-2.2652,-3.5119,5.123;-3.2996,-4.0812,3.0155;-1.0117,-3.3059,3.0721;-1.0824,-3.1855,4.4566;-3.3714,-3.9626,4.4008;-4.1673,-4.4365,2.4525;-.0675,-3.0552,2.5825;-.1981,-2.8522,5.0071;-4.296,-4.2285,4.9203;-2.3197,-3.4254,6.2119;1.5458,-3.772,-.5202;2.2586,-3.1798,-.9537;.4195,.5835,-4.5356;-3.044,-2.0604,-.0601;-3.0258,-1.3212,1.12;-2.0373,-.6175,1.5629;-.7092,.4772,1.3045;-.9309,1.3931,-.3014;.8196,-.5638,1.4722;-.8854,1.6211,2.7779;-4.0739,-1.3975,1.9288;-4.0124,-.7648,3.1969;-.5192,.8007,-1.1365;-.3622,2.3401,-.2466;-1.9903,1.6443,-.4886;.9179,-.8886,2.5216;1.7164,.0204,1.2001;.8013,-1.4388,.8024;-.8813,1.0517,3.7243;-.0404,2.3328,2.8106;-1.818,2.2111,2.7295;-3.1585,-1.1358,3.7857;-4.954,-1.0229,3.6996;-3.9352,.3289,3.0821;4.8366,-.5379,.9775;4.4801,-1.8903,.9155;3.7955,-2.4913,1.9653;3.4864,-1.7252,3.0849;3.8892,-.3983,3.2064;4.5707,.1887,2.1454;4.6717,-2.4513,.0003;3.4554,-3.5252,1.8967;2.6068,-2.2977,4.1089;3.6282,.1693,4.1003;4.8583,1.2421,2.2015;-.8317,1.086,-4.1462;-1.962,.2803,-4.146;-1.8334,-1.0468,-4.5412;-.617,-1.5687,-4.969;.5042,-.7474,-4.9699;-.9094,2.1136,-3.7823;-2.9302,.6565,-3.8146;-3.0054,-1.9255,-4.461;-.5558,-2.615,-5.2698;1.4669,-1.1576,-5.2768;2.1786,-1.5539,4.9703;2.3167,-3.4725,4.0203;-2.9084,-3.0464,-4.9122;-4.0071,-1.484,-3.9335;7.1801,.9955,-1.6312;6.2379,1.426,-2.6108;8.5698,1.1654,-1.8785;9.0161,1.7124,-3.0564;9.2816,.839,-1.114;10.0879,1.8321,-3.2379;6.7342,1.9662,-3.8301;8.0841,2.1053,-4.0466;6.0255,2.2631,-4.6064;8.4414,2.5164,-4.9951;3.6876,3.227,-3.5505;2.6068,3.6896,-4.3573;4.6131,4.1911,-3.0595;4.5069,5.5178,-3.403;5.4174,3.8714,-2.3951;5.2323,6.2368,-3.0117;2.5326,5.0658,-4.7091;3.4655,5.9629,-4.2517;1.7054,5.3999,-5.3432;3.3972,7.0195,-4.5253;-4.3664,-2.6318,-.5164;-4.2057,-3.3981,-1.2931;-4.9427,-3.0746,.3123;-4.9965,-1.8505,-.9802;-2.0518,-1.703,-1.1342;-2.2975,-.7264,-1.5877;-1.0054,-1.6444,-.7961;-2.0758,-2.4454,-1.9436;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648090275474</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000377770622 0.000032404272 0.048948345554 0.005346595250</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455246 -0.000129783 0.000105978 0.000139119 0.000175787 0.000198765 0.000281958 0.000324064 0.000499278 0.000535259 0.000649988 0.000720694 0.000757508 0.000779104 0.000836425 0.000939643 0.001002115 0.001087726 0.001118697 0.001179774 0.001257948 0.001328357 0.001435361 0.001578889 0.001651689 0.001930208 0.002050504 0.002134269 0.002197760 0.002373024 0.002614622 0.002989655 0.003285356 0.003388547 0.003823925 0.003918099 0.004054757 0.004410503 0.005045260 0.005351914 0.005482882 0.005897880 0.006108245 0.006483525 0.007166510 0.007607141 0.007765132 0.008197941 0.008817087 0.009338175 0.009868752 0.011046388 0.011600865 0.012743047 0.012937599 0.013307666 0.013707308 0.014594474 0.014881002 0.015201585 0.015455034 0.016017512 0.016557875 0.016791288 0.017271638 0.017713777 0.018600535 0.019220192 0.020653739 0.020789598 0.021321770 0.022419729 0.022796540 0.024001199 0.025852441 0.026332882 0.026770512 0.028272940 0.028779601 0.030553697 0.031089739 0.031405806 0.032028515 0.033348259 0.033746535 0.036803273 0.037291986 0.038892731 0.039185489 0.040749290 0.041390456 0.043662959 0.045092195 0.048233478 0.049062118 0.049440403 0.049983283 0.050952094 0.050994751 0.052107805 0.052332590 0.052392445 0.052536758 0.053392962 0.054034496 0.054636634 0.055079385 0.055821007 0.056363006 0.056457144 0.057033480 0.057665972 0.058396177 0.059528195 0.060597872 0.060827906 0.061207587 0.061770009 0.062258479 0.064890930 0.065629455 0.065740522 0.066265738 0.071243499 0.073715368 0.074347593 0.076769941 0.078598817 0.083509610 0.084158301 0.085022663 0.086195618 0.086856990 0.089579056 0.090469736 0.091939582 0.094408842 0.094642778 0.095553577 0.095826231 0.096110622 0.097373735 0.098209080 0.098888223 0.099334045 0.099916095 0.100519614 0.101439151 0.102205618 0.102984060 0.103727310 0.104374619 0.105978762 0.106076851 0.106637946 0.108417954 0.109592761 0.110478694 0.112247480 0.113029523 0.116249171 0.118119925 0.118461158 0.120948390 0.122608320 0.123395839 0.125499992 0.126257284 0.130396526 0.131556361 0.134757683 0.141536836 0.142301589 0.144787491 0.145753964 0.146386482 0.146714770 0.147053059 0.152423082 0.155224225 0.159440744 0.170446550 0.172538100 0.174907566 0.181756580 0.182640367 0.185923720 0.186594377 0.190606456 0.192521331 0.195961161 0.197603656 0.200045320 0.204695034 0.205583943 0.206729292 0.209146952 0.209612482 0.211967728 0.214673150 0.217574810 0.223855911 0.224653822 0.228937166 0.233418995 0.234044558 0.234796666 0.242993629 0.252858789 0.256485701 0.256643940 0.262645411 0.278090863 0.282222588 0.285972731 0.286946956 0.291190763 0.298391235 0.301938503 0.302920552 0.305128875 0.311830890 0.314461680 0.320525947 0.321411965 0.327174275 0.342777890 0.344594927 0.348108530 0.348926581 0.350187748 0.354272049 0.360741776 0.361445332 0.369753452 0.380260129 0.404063639 0.421641742 0.424455306 0.450429789 0.462661835 0.468594110 0.472816786 0.473762616 0.475619440 0.479437089 0.485683520 0.503440281 0.529373605 0.558017476 0.564055684 0.568021696 0.589943232 0.592091778 0.602307776 0.635341990 0.639045221 0.641833613 0.662127751 0.668190138 0.680356210 0.683648706 0.691223988 0.694102863 0.703808060 0.704695257 0.711696461 0.737809199 0.749890735 0.759262597 0.771829059 0.776571452 0.804064424 0.808658499 0.810853494 0.813145188 0.819316758 0.820435836 0.828655009 0.829402451 0.831170519 0.839408837 0.844138644 0.844896007 0.849376152 0.856929259 0.861391739 0.864546866 0.869750930 0.871096911 0.883135175 0.887374375 0.890901125 0.892333228 0.915808121 0.921885558 0.930255573 0.932035488 0.963531272 0.975087658 0.976606166 0.991198468 0.999287876 1.022697158 1.034247048 1.043465457 1.050965024 1.057925749 1.083755885 1.085395067 1.088420451 1.104694206 1.106578454 1.112035885 1.122551635 1.123465055 1.134952031 1.138925857 1.167327044 1.170524862 1.178726490 1.185385267 1.194048157 1.202717467 1.219683090 1.239365294 1.243798371 1.295233659 1.312860667 1.323316715 1.325224120 1.326411328 1.331961607 1.332980682 1.340341081 1.341692051 1.355382212 1.374673678 1.378137817 1.380925691 1.380935106 1.417938340 1.550963591 1.659883093 1.674195563</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">8</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38245453" y3="0.14316825" z3="-0.23124158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44773124" y3="0.06581435" z3="0.31745208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71762142" y3="0.38279343" z3="-0.43342919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83415762" y3="1.27045826" z3="-2.35259427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44794529" y3="0.57700844" z3="-1.21694771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76136691" y3="0.98531852" z3="-3.67288672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.77085419" y3="1.82647018" z3="-3.23875848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.57575441" y3="2.78439117" z3="-4.73159875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60813216" y3="1.45771202" z3="-4.36961078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.71894513" y3="3.17087477" z3="-5.29217875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84776409" y3="-0.34179703" z3="-3.38620654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13127036" y3="0.31389555" z3="-0.98882708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38226926" y3="-0.86926108" z3="-1.89318169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91971167" y3="-0.7277301" z3="-1.67135237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09770543" y3="-2.18428113" z3="-1.71030742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.0443403" y3="-3.75653388" z3="0.742842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.39495378" y3="-5.19731326" z3="-4.70540821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.11023038" y3="-5.00431694" z3="-3.66706041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.6222752" y3="-4.47838636" z3="-1.04500334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.05796142" y3="-4.49515078" z3="-2.7809829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.19184731" y3="-5.27730916" z3="-3.24333497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.55827588" y3="-5.01608204" z3="-1.9248814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.70376264" y3="-4.24157051" z3="-1.45337668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.07770381" y3="-4.27095868" z3="-3.10216145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.93037523" y3="-5.67458942" z3="-3.94241102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.58528666" y3="-5.20363553" z3="-1.6015737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.89413957" y3="-4.07346488" z3="0.27526615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.06927768" y3="-3.92220189" z3="0.87421835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.91475384" y3="-4.43888324" z3="0.41705537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11799897" y3="-3.7542348" z3="2.33555466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26414658" y3="-3.51057147" z3="5.12406138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30051572" y3="-4.0774139" z3="3.01681987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01162914" y3="-3.30460352" z3="3.07247516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0813784" y3="-3.18496217" z3="4.45705428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37128594" y3="-3.95960816" z3="4.40221581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.16897662" y3="-4.43112952" z3="2.45401923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06755091" y3="-3.05445178" z3="2.5823385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.19648021" y3="-2.85278389" z3="5.00731732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29586418" y3="-4.22490197" z3="4.92222658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.31780328" y3="-3.4247538" z3="6.21297036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.54329641" y3="-3.77386876" z3="-0.52182281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25707346" y3="-3.18265095" z3="-0.95500583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.42063672" y3="0.57784716" z3="-4.53671897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04396213" y3="-2.05526716" z3="-0.05842475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.02429312" y3="-1.31663155" z3="1.12195474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.03481272" y3="-0.61397565" z3="1.56458532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.70509149" y3="0.47860425" z3="1.30575596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.92517209" y3="1.39492277" z3="-0.3001581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.82258146" y3="-0.56405557" z3="1.4733608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.87915522" y3="1.6230168" z3="2.77897233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.07206335" y3="-1.39209361" z3="1.93127553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.00923066" y3="-0.76041394" z3="3.19975083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.51491572" y3="0.80165603" z3="-1.13527526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.35437223" y3="2.34061649" z3="-0.24544314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.98386103" y3="1.64852096" z3="-0.4872931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.92027429" y3="-0.8891579" z3="2.5227389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.71981823" y3="0.01968413" z3="1.20160297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80419259" y3="-1.43894076" z3="0.80359602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.87535488" y3="1.05384737" z3="3.72547457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.03311921" y3="2.33358334" z3="2.81104503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.81089575" y3="2.2143209" z3="2.73098069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.15562965" y3="-1.13281025" z3="3.78799333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.95097497" y3="-1.01773325" z3="3.70269999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.93076408" y3="0.33334301" z3="3.08569922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83715332" y3="-0.53920552" z3="0.97837814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4798165" y3="-1.89141345" z3="0.91584323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79568678" y3="-2.49254335" z3="1.96579722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.48770646" y3="-1.72697495" z3="3.08596781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.89130246" y3="-0.40036696" z3="3.20803279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.57244623" y3="0.18689577" z3="2.14691529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.67046179" y3="-2.45190034" z3="0.00012787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45496909" y3="-3.52622606" z3="1.896774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.60819986" y3="-2.29951694" z3="4.11006578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.63111427" y3="0.16689807" z3="4.10232596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.86057014" y3="1.24006775" z3="2.2033648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8322535" y3="1.07415183" z3="-4.14465095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.95980062" y3="0.26458272" z3="-4.148771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.82702163" y3="-1.05954653" z3="-4.5526769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.60888341" y3="-1.57497029" z3="-4.98350864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.50992545" y3="-0.7504825" z3="-4.97809023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.91317867" y3="2.09978948" z3="-3.775675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92943687" y3="0.63578166" z3="-3.81534628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.99646189" y3="-1.94243567" z3="-4.481745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.54472394" y3="-2.61896846" z3="-5.29192713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.4741912" y3="-1.15589211" z3="-5.28667766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18117524" y3="-1.55598207" z3="4.97235868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31679469" y3="-3.47395198" z3="4.02049654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.90110124" y3="-3.05339215" z3="-4.96117296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.99453955" y3="-1.5141386" z3="-3.93449817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17918851" y3="0.99714902" z3="-1.62982802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23667084" y3="1.42701725" z3="-2.60926694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.5687386" y3="1.16848337" z3="-1.8769807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01457414" y3="1.71634811" z3="-3.05467901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28081" y3="0.84242128" z3="-1.11254179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.08622628" y3="1.83706427" z3="-3.23604136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73248596" y3="1.96831219" z3="-3.82831301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.08225987" y3="2.10879475" z3="-4.04473821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02347894" y3="2.26478347" z3="-4.60454215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.43915176" y3="2.52059423" z3="-4.99298931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.68399963" y3="3.22607329" z3="-3.54760825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.60199733" y3="3.68804124" z3="-4.35327255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.60871622" y3="4.19080693" z3="-3.05659354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.500846" y3="5.51758814" z3="-3.39910486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.41385227" y3="3.87148323" z3="-2.39306097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.22580524" y3="6.23705883" z3="-3.00789638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.52601701" y3="5.06438212" z3="-4.70398595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.45834558" y3="5.96214559" z3="-4.24675167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.69809565" y3="5.3979617" z3="-5.33729933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.38873469" y3="7.01881699" z3="-4.51966966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.36713306" y3="-2.62510309" z3="-0.51407506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.20776585" y3="-3.39274927" z3="-1.28985095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.94414261" y3="-3.06589222" z3="0.31539712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99562989" y3="-1.84327385" z3="-0.97931029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05189695" y3="-1.69841285" z3="-1.13284495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29551039" y3="-0.72047942" z3="-1.58431028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00501253" y3="-1.6432707" z3="-0.79583713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.0786511" y3="-2.43912534" z3="-1.94366816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3825,.1432,-.2312;7.4477,.0658,.3175;6.7176,.3828,-.4334;4.8342,1.2705,-2.3526;4.4479,.577,-1.2169;2.7614,.9853,-3.6729;3.7709,1.8265,-3.2388;1.5758,2.7844,-4.7316;1.6081,1.4577,-4.3696;.7189,3.1709,-5.2922;2.8478,-.3418,-3.3862;3.1313,.3139,-.9888;2.3823,-.8693,-1.8932;.9197,-.7277,-1.6714;3.0977,-2.1843,-1.7103;-.0443,-3.7565,.7428;.395,-5.1973,-4.7054;.1102,-5.0043,-3.6671;-.6223,-4.4784,-1.045;1.058,-4.4952,-2.781;-1.1918,-5.2773,-3.2433;-1.5583,-5.0161,-1.9249;.7038,-4.2416,-1.4534;2.0777,-4.271,-3.1022;-1.9304,-5.6746,-3.9424;-2.5853,-5.2036,-1.6016;-.8941,-4.0735,.2753;-2.0693,-3.9222,.8742;-2.9148,-4.4389,.4171;-2.118,-3.7542,2.3356;-2.2641,-3.5106,5.1241;-3.3005,-4.0774,3.0168;-1.0116,-3.3046,3.0725;-1.0814,-3.185,4.4571;-3.3713,-3.9596,4.4022;-4.169,-4.4311,2.454;-.0676,-3.0545,2.5823;-.1965,-2.8528,5.0073;-4.2959,-4.2249,4.9222;-2.3178,-3.4248,6.213;1.5433,-3.7739,-.5218;2.2571,-3.1827,-.955;.4206,.5778,-4.5367;-3.044,-2.0553,-.0584;-3.0243,-1.3166,1.122;-2.0348,-.614,1.5646;-.7051,.4786,1.3058;-.9252,1.3949,-.3002;.8226,-.5641,1.4734;-.8792,1.623,2.779;-4.0721,-1.3921,1.9313;-4.0092,-.7604,3.1998;-.5149,.8017,-1.1353;-.3544,2.3406,-.2454;-1.9839,1.6485,-.4873;.9203,-.8892,2.5227;1.7198,.0197,1.2016;.8042,-1.4389,.8036;-.8754,1.0538,3.7255;-.0331,2.3336,2.811;-1.8109,2.2143,2.731;-3.1556,-1.1328,3.788;-4.951,-1.0177,3.7027;-3.9308,.3333,3.0857;4.8372,-.5392,.9784;4.4798,-1.8914,.9158;3.7957,-2.4925,1.9658;3.4877,-1.727,3.086;3.8913,-.4004,3.208;4.5724,.1869,2.1469;4.6705,-2.4519,.0001;3.455,-3.5262,1.8968;2.6082,-2.2995,4.1101;3.6311,.1669,4.1023;4.8606,1.2401,2.2034;-.8323,1.0742,-4.1447;-1.9598,.2646,-4.1488;-1.827,-1.0595,-4.5527;-.6089,-1.575,-4.9835;.5099,-.7505,-4.9781;-.9132,2.0998,-3.7757;-2.9294,.6358,-3.8153;-2.9965,-1.9424,-4.4817;-.5447,-2.619,-5.2919;1.4742,-1.1559,-5.2867;2.1812,-1.556,4.9724;2.3168,-3.474,4.0205;-2.9011,-3.0534,-4.9612;-3.9945,-1.5141,-3.9345;7.1792,.9971,-1.6298;6.2367,1.427,-2.6093;8.5687,1.1685,-1.877;9.0146,1.7163,-3.0547;9.2808,.8424,-1.1125;10.0862,1.8371,-3.236;6.7325,1.9683,-3.8283;8.0823,2.1088,-4.0447;6.0235,2.2648,-4.6045;8.4392,2.5206,-4.993;3.684,3.2261,-3.5476;2.602,3.688,-4.3533;4.6087,4.1908,-3.0566;4.5008,5.5176,-3.3991;5.4139,3.8715,-2.3931;5.2258,6.2371,-3.0079;2.526,5.0644,-4.704;3.4583,5.9621,-4.2468;1.6981,5.398,-5.3373;3.3887,7.0188,-4.5197;-4.3671,-2.6251,-.5141;-4.2078,-3.3927,-1.2899;-4.9441,-3.0659,.3154;-4.9956,-1.8433,-.9793;-2.0519,-1.6984,-1.1328;-2.2955,-.7205,-1.5843;-1.005,-1.6433,-.7958;-2.0787,-2.4391,-1.9437;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648094260643</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004444347626 0.000318524412 0.033001645891 0.005337608967</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455240 -0.000599925 0.000106412 0.000139120 0.000187735 0.000207940 0.000282333 0.000327910 0.000503258 0.000541971 0.000663552 0.000728249 0.000758168 0.000779606 0.000836838 0.000940240 0.001011754 0.001088364 0.001119852 0.001182750 0.001258058 0.001331140 0.001437320 0.001580365 0.001651837 0.001946169 0.002060460 0.002137894 0.002201464 0.002372996 0.002625316 0.002989828 0.003285332 0.003591959 0.003832104 0.004000771 0.004210554 0.004458841 0.005044719 0.005352094 0.005492597 0.005909559 0.006111155 0.006484635 0.007166329 0.007608993 0.007765100 0.008199514 0.008816984 0.009338208 0.009868863 0.011046429 0.011600912 0.012743273 0.012937980 0.013308487 0.013707272 0.014595249 0.014881133 0.015201706 0.015455038 0.016017511 0.016557889 0.016791644 0.017271683 0.017713792 0.018600874 0.019220187 0.020653886 0.020789871 0.021323393 0.022421388 0.022796681 0.024001215 0.025852441 0.026332898 0.026770507 0.028272941 0.028779661 0.030553860 0.031090246 0.031405776 0.032028510 0.033348259 0.033746547 0.036803397 0.037291970 0.038892723 0.039185596 0.040749286 0.041390595 0.043662961 0.045092203 0.048233486 0.049062137 0.049440405 0.049983289 0.050952179 0.050994792 0.052107803 0.052332590 0.052392445 0.052536761 0.053392968 0.054034498 0.054636636 0.055079383 0.055821032 0.056363006 0.056457142 0.057033479 0.057665965 0.058396203 0.059528182 0.060597824 0.060827916 0.061207526 0.061770039 0.062258477 0.064890929 0.065629468 0.065740509 0.066265725 0.071243564 0.073715417 0.074347595 0.076770161 0.078598929 0.083509593 0.084158375 0.085022690 0.086195614 0.086856965 0.089579067 0.090469727 0.091939637 0.094408842 0.094642776 0.095553633 0.095826225 0.096110615 0.097373736 0.098209079 0.098888301 0.099334044 0.099916186 0.100519805 0.101439148 0.102206023 0.102984094 0.103727330 0.104374631 0.105978759 0.106076945 0.106638167 0.108418564 0.109592787 0.110478757 0.112247466 0.113029530 0.116249141 0.118119888 0.118461151 0.120948409 0.122608130 0.123395837 0.125499970 0.126257225 0.130396583 0.131556330 0.134757689 0.141536871 0.142301588 0.144787592 0.145753892 0.146386598 0.146714493 0.147053218 0.152423100 0.155224663 0.159440743 0.170446743 0.172538096 0.174907567 0.181756575 0.182640373 0.185923716 0.186594369 0.190606459 0.192521287 0.195961229 0.197603665 0.200045677 0.204695011 0.205583942 0.206729297 0.209147021 0.209612487 0.211967850 0.214673358 0.217574849 0.223855918 0.224653823 0.228937215 0.233419011 0.234044562 0.234796712 0.242993710 0.252858872 0.256485725 0.256644048 0.262645423 0.278090921 0.282222591 0.285972736 0.286947007 0.291190781 0.298392260 0.301939748 0.302920980 0.305128893 0.311831031 0.314461680 0.320526597 0.321412003 0.327175045 0.342777903 0.344601909 0.348108653 0.348926748 0.350188202 0.354272064 0.360741778 0.361445760 0.369753781 0.380274257 0.404072857 0.421642525 0.424455464 0.450429806 0.462678020 0.468594153 0.472836348 0.473768645 0.475619614 0.479456967 0.485683526 0.503458873 0.529392073 0.558062759 0.564062709 0.568040468 0.589943673 0.592091778 0.602308338 0.635342123 0.639045233 0.641837610 0.662127876 0.668195956 0.680356268 0.683648736 0.691223987 0.694102948 0.703808073 0.704695610 0.711700588 0.737810281 0.749890753 0.759262598 0.771829076 0.776571506 0.804064436 0.808658534 0.810853556 0.813145187 0.819318386 0.820435835 0.828655003 0.829405770 0.831170524 0.839408856 0.844138648 0.844896056 0.849376154 0.856929260 0.861391740 0.864547013 0.869751685 0.871098029 0.883135194 0.887374375 0.890901177 0.892334459 0.915808150 0.921885584 0.930255572 0.932035570 0.963531305 0.975087765 0.976606323 0.991198609 0.999287877 1.022697172 1.034247131 1.043465458 1.050965026 1.057925746 1.083755889 1.085395053 1.088420452 1.104694213 1.106578456 1.112035888 1.122551637 1.123465057 1.134952034 1.138925864 1.167327040 1.170525062 1.178726498 1.185386334 1.194048161 1.202717465 1.219688727 1.239424743 1.244225772 1.295234109 1.312861345 1.323316831 1.325224207 1.326411640 1.332002752 1.332986152 1.340341103 1.341692062 1.355382316 1.374673679 1.378139862 1.380926005 1.380935220 1.417938533 1.550963591 1.659883104 1.674242894</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">9</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38252554" y3="0.14201009" z3="-0.23042101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44785145" y3="0.06741474" z3="0.31850125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71738018" y3="0.38373213" z3="-0.43231054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83288607" y3="1.26999003" z3="-2.3510206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44749241" y3="0.5750016" z3="-1.21603383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76102789" y3="0.98281979" z3="-3.6721869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.7688648" y3="1.82526234" z3="-3.2367706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.57201788" y3="2.78113496" z3="-4.72841676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60738232" y3="1.453801" z3="-4.36906067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.71451113" y3="3.16671686" z3="-5.28855258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.84930769" y3="-0.34437256" z3="-3.38635067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1311658" y3="0.30998382" z3="-0.98827724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38281269" y3="-0.8727158" z3="-1.89393917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92012551" y3="-0.73104837" z3="-1.67280196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09794402" y3="-2.18790347" z3="-1.71134879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.04676372" y3="-3.75462044" z3="0.74151356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.38634636" y3="-5.19366108" z3="-4.70760043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.10282654" y3="-5.00099104" z3="-3.66886376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.62703617" y3="-4.47499521" z3="-1.04613199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.0521161" y3="-4.49414792" z3="-2.78311096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.19943071" y3="-5.27184505" z3="-3.24444556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.56458533" y3="-5.01045593" z3="-1.9257061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.69927077" y3="-4.24078282" z3="-1.45514624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.07204764" y3="-4.27161747" z3="-3.10487617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.93943188" y3="-5.66646003" z3="-3.9434839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.59183097" y3="-5.19599565" z3="-1.60200177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.89734801" y3="-4.07012043" z3="0.27444049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.07206256" y3="-3.91700612" z3="0.87403696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.91822207" y3="-4.43306666" z3="0.41764952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.11936786" y3="-3.75037251" z3="2.3357535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26311954" y3="-3.50902187" z3="5.12466195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30189682" y3="-4.07223728" z3="3.01761561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01169528" y3="-3.30338174" z3="3.07233782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.08026179" y3="-3.18484666" z3="4.45709397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37151121" y3="-3.9555675" z3="4.40317882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.17136006" y3="-4.42401198" z3="2.45513436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06745091" y3="-3.05456566" z3="2.58181472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.19440653" y3="-2.8546911" z3="5.00706227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29617246" y3="-4.21981324" z3="4.92359973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.31586402" y3="-3.42408075" z3="6.21368733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.54040245" y3="-3.77564755" z3="-0.52365565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2553165" y3="-3.18591324" z3="-0.95666249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.42277017" y3="0.57081468" z3="-4.54014556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04440013" y3="-2.04976404" z3="-0.05646911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.02273573" y3="-1.31096201" z3="1.12398954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.03205647" y3="-0.60951491" z3="1.56547816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.69982791" y3="0.48025326" z3="1.30685944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.91775385" y3="1.39710417" z3="-0.29901187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.82568247" y3="-0.5655079" z3="1.47389028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.87163088" y3="1.62467221" z3="2.78032336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.06976022" y3="-1.38519021" z3="1.9342696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.00459184" y3="-0.7544921" z3="3.2031866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.50929038" y3="0.80250771" z3="-1.13411878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.3441375" y3="2.341139" z3="-0.24445225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.97576117" y3="1.65380296" z3="-0.48594051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9229459" y3="-0.89139428" z3="2.52306895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.72390214" y3="0.01685873" z3="1.20241553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80558002" y3="-1.43990024" z3="0.80348905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.86857388" y3="1.05531366" z3="3.72671711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.02436975" y3="2.33379006" z3="2.81234035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.80238163" y3="2.21758051" z3="2.73268535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.15103466" y3="-1.12887737" z3="3.79026033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.94628893" y3="-1.01058244" z3="3.7068715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.92432632" y3="0.33920055" z3="3.08983164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83806389" y3="-0.54126961" z3="0.97905381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47946111" y3="-1.89311264" z3="0.91547038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79588575" y3="-2.49471215" z3="1.96550589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.4897023" y3="-1.73000786" z3="3.08678606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.89468019" y3="-0.40390339" z3="3.20986838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.57532789" y3="0.18383613" z3="2.14868105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.668544" y3="-2.45280816" z3="-0.00107462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45414718" y3="-3.52802164" z3="1.89573849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61038708" y3="-2.30269571" z3="4.11097141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.6359098" y3="0.16268643" z3="4.10502098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.86450867" y3="1.23668985" z3="2.20596254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83200767" y3="1.06151642" z3="-4.14742296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.95704206" y3="0.24854237" z3="-4.15691644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.81975536" y3="-1.07348293" z3="-4.56579023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.59946384" y3="-1.58332518" z3="-4.99690078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.51670496" y3="-0.75528265" z3="-4.98701483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.91642393" y3="2.08518306" z3="-3.7738032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92827629" y3="0.61526347" z3="-3.82340555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.98697931" y3="-1.95933236" z3="-4.49887363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.53154221" y3="-2.62558332" z3="-5.30971861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.48256075" y3="-1.15609132" z3="-5.29667234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18450612" y3="-1.55952558" z3="4.97413702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31792989" y3="-3.47679356" z3="4.02057479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.88422515" y3="-3.07118854" z3="-4.96401267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.99095522" y3="-1.53190771" z3="-3.96749982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17822522" y3="0.99941552" z3="-1.62831294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23517771" y3="1.4287432" z3="-2.60747723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56756099" y3="1.17270151" z3="-1.87534939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01269495" y3="1.72199477" z3="-3.05266158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.28005679" y3="0.84696657" z3="-1.11116462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.08419782" y3="1.84415979" z3="-3.23396645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.73028223" y3="1.9716973" z3="-3.82608443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.07988243" y3="2.11406111" z3="-4.04240864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02087701" y3="2.26788427" z3="-4.60206761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.43625902" y3="2.52705147" z3="-4.99034546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.67953243" y3="3.22511039" z3="-3.54385445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.59637289" y3="3.68629674" z3="-4.34842846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.60289589" y3="4.19076184" z3="-3.05204858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.49261779" y3="5.51784126" z3="-3.39273066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.40899017" y3="3.87188912" z3="-2.38946224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.2166884" y3="6.23799275" z3="-3.00110159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.51773964" y3="5.06306654" z3="-4.69700551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.4488005" y3="5.96181072" z3="-4.23906532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.68890731" y3="5.39612657" z3="-5.32940209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.37723809" y3="7.01876046" z3="-4.51049391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.36895306" y3="-2.61730582" z3="-0.51115031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.21131095" y3="-3.38605912" z3="-1.28612343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.94672922" y3="-3.05599401" z3="0.31883957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99608646" y3="-1.8347228" z3="-0.97695867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05388572" y3="-1.69293989" z3="-1.13243113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29748757" y3="-0.71437461" z3="-1.5825822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0063364" y3="-1.63896557" z3="-0.79735462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.08295641" y3="-2.4327392" z3="-1.94395666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3825,.142,-.2304;7.4479,.0674,.3185;6.7174,.3837,-.4323;4.8329,1.27,-2.351;4.4475,.575,-1.216;2.761,.9828,-3.6722;3.7689,1.8253,-3.2368;1.572,2.7811,-4.7284;1.6074,1.4538,-4.3691;.7145,3.1667,-5.2886;2.8493,-.3444,-3.3864;3.1312,.31,-.9883;2.3828,-.8727,-1.8939;.9201,-.731,-1.6728;3.0979,-2.1879,-1.7113;-.0468,-3.7546,.7415;.3863,-5.1937,-4.7076;.1028,-5.001,-3.6689;-.627,-4.475,-1.0461;1.0521,-4.4941,-2.7831;-1.1994,-5.2718,-3.2444;-1.5646,-5.0105,-1.9257;.6993,-4.2408,-1.4551;2.072,-4.2716,-3.1049;-1.9394,-5.6665,-3.9435;-2.5918,-5.196,-1.602;-.8973,-4.0701,.2744;-2.0721,-3.917,.874;-2.9182,-4.4331,.4176;-2.1194,-3.7504,2.3358;-2.2631,-3.509,5.1247;-3.3019,-4.0722,3.0176;-1.0117,-3.3034,3.0723;-1.0803,-3.1848,4.4571;-3.3715,-3.9556,4.4032;-4.1714,-4.424,2.4551;-.0675,-3.0546,2.5818;-.1944,-2.8547,5.0071;-4.2962,-4.2198,4.9236;-2.3159,-3.4241,6.2137;1.5404,-3.7756,-.5237;2.2553,-3.1859,-.9567;.4228,.5708,-4.5401;-3.0444,-2.0498,-.0565;-3.0227,-1.311,1.124;-2.0321,-.6095,1.5655;-.6998,.4803,1.3069;-.9178,1.3971,-.299;.8257,-.5655,1.4739;-.8716,1.6247,2.7803;-4.0698,-1.3852,1.9343;-4.0046,-.7545,3.2032;-.5093,.8025,-1.1341;-.3441,2.3411,-.2445;-1.9758,1.6538,-.4859;.9229,-.8914,2.5231;1.7239,.0169,1.2024;.8056,-1.4399,.8035;-.8686,1.0553,3.7267;-.0244,2.3338,2.8123;-1.8024,2.2176,2.7327;-3.151,-1.1289,3.7903;-4.9463,-1.0106,3.7069;-3.9243,.3392,3.0898;4.8381,-.5413,.9791;4.4795,-1.8931,.9155;3.7959,-2.4947,1.9655;3.4897,-1.73,3.0868;3.8947,-.4039,3.2099;4.5753,.1838,2.1487;4.6685,-2.4528,-.0011;3.4541,-3.528,1.8957;2.6104,-2.3027,4.111;3.6359,.1627,4.105;4.8645,1.2367,2.206;-.832,1.0615,-4.1474;-1.957,.2485,-4.1569;-1.8198,-1.0735,-4.5658;-.5995,-1.5833,-4.9969;.5167,-.7553,-4.987;-.9164,2.0852,-3.7738;-2.9283,.6153,-3.8234;-2.987,-1.9593,-4.4989;-.5315,-2.6256,-5.3097;1.4826,-1.1561,-5.2967;2.1845,-1.5595,4.9741;2.3179,-3.4768,4.0206;-2.8842,-3.0712,-4.964;-3.991,-1.5319,-3.9675;7.1782,.9994,-1.6283;6.2352,1.4287,-2.6075;8.5676,1.1727,-1.8753;9.0127,1.722,-3.0527;9.2801,.847,-1.1112;10.0842,1.8442,-3.234;6.7303,1.9717,-3.8261;8.0799,2.1141,-4.0424;6.0209,2.2679,-4.6021;8.4363,2.5271,-4.9903;3.6795,3.2251,-3.5439;2.5964,3.6863,-4.3484;4.6029,4.1908,-3.052;4.4926,5.5178,-3.3927;5.409,3.8719,-2.3895;5.2167,6.238,-3.0011;2.5177,5.0631,-4.697;3.4488,5.9618,-4.2391;1.6889,5.3961,-5.3294;3.3772,7.0188,-4.5105;-4.369,-2.6173,-.5112;-4.2113,-3.3861,-1.2861;-4.9467,-3.056,.3188;-4.9961,-1.8347,-.977;-2.0539,-1.6929,-1.1324;-2.2975,-.7144,-1.5826;-1.0063,-1.639,-.7974;-2.083,-2.4327,-1.944;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648086558434</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008284317056 0.000584211490 0.058749353742 0.005337423831</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455267 -0.001580516 0.000106466 0.000139151 0.000188669 0.000210602 0.000282634 0.000327925 0.000504114 0.000542980 0.000664787 0.000731929 0.000758256 0.000779697 0.000836858 0.000940199 0.001014616 0.001088341 0.001119843 0.001184814 0.001258110 0.001336105 0.001437427 0.001580667 0.001651929 0.001954401 0.002064200 0.002147262 0.002206962 0.002373224 0.002636728 0.002990799 0.003285581 0.003730089 0.003833965 0.004019987 0.004375252 0.005044636 0.005325869 0.005352441 0.005689542 0.006053721 0.006204115 0.006507240 0.007172499 0.007619810 0.007766009 0.008209181 0.008817764 0.009338613 0.009868867 0.011047333 0.011601241 0.012743841 0.012938294 0.013309938 0.013707701 0.014604249 0.014881390 0.015202334 0.015456071 0.016017976 0.016557971 0.016794883 0.017273928 0.017714133 0.018603444 0.019220468 0.020657771 0.020791028 0.021338995 0.022438677 0.022798080 0.024001574 0.025852450 0.026332901 0.026770577 0.028272941 0.028779764 0.030555683 0.031094480 0.031406256 0.032029109 0.033348265 0.033746546 0.036803747 0.037292041 0.038892879 0.039185594 0.040749331 0.041391528 0.043662978 0.045092226 0.048233518 0.049062134 0.049440427 0.049983291 0.050952369 0.050994886 0.052107803 0.052332589 0.052392444 0.052536779 0.053392962 0.054034520 0.054636631 0.055079398 0.055821193 0.056363004 0.056457143 0.057033481 0.057666276 0.058396719 0.059528170 0.060597827 0.060827908 0.061207513 0.061770052 0.062258479 0.064890929 0.065629612 0.065740513 0.066265854 0.071244303 0.073715761 0.074347820 0.076771025 0.078600626 0.083509957 0.084159447 0.085022683 0.086195638 0.086857091 0.089579212 0.090469844 0.091940498 0.094408964 0.094642853 0.095553785 0.095826236 0.096110731 0.097373738 0.098209087 0.098888297 0.099334054 0.099916172 0.100520392 0.101439174 0.102206880 0.102984100 0.103727345 0.104374630 0.105978767 0.106077358 0.106638448 0.108418806 0.109592786 0.110478884 0.112247498 0.113029541 0.116249236 0.118119903 0.118461245 0.120948655 0.122608316 0.123395836 0.125499989 0.126257190 0.130396579 0.131556319 0.134757696 0.141536987 0.142301577 0.144787306 0.145753782 0.146386424 0.146713936 0.147053001 0.152423066 0.155224602 0.159440742 0.170447962 0.172538094 0.174907794 0.181756717 0.182640354 0.185923717 0.186594399 0.190606486 0.192521238 0.195961653 0.197603640 0.200045654 0.204695040 0.205583948 0.206729328 0.209148767 0.209612491 0.211967885 0.214673286 0.217575028 0.223855917 0.224653822 0.228937689 0.233419237 0.234044617 0.234796728 0.242994059 0.252859011 0.256485827 0.256645050 0.262645924 0.278091314 0.282222589 0.285972738 0.286948053 0.291190870 0.298398250 0.301948705 0.302921767 0.305128918 0.311832671 0.314461682 0.320528711 0.321412060 0.327181199 0.342778586 0.344641900 0.348108678 0.348926976 0.350190420 0.354272115 0.360741796 0.361447497 0.369753984 0.380346384 0.404116831 0.421645777 0.424455509 0.450429813 0.462766564 0.468594325 0.472924473 0.473809756 0.475620767 0.479567032 0.485683559 0.503570127 0.529501727 0.558314596 0.564107810 0.568163238 0.589943802 0.592091825 0.602312054 0.635342237 0.639045233 0.641861508 0.662127942 0.668232986 0.680356288 0.683648866 0.691223990 0.694102971 0.703808133 0.704697607 0.711724083 0.737816672 0.749890860 0.759262598 0.771829200 0.776571810 0.804064448 0.808658555 0.810853624 0.813145193 0.819328257 0.820435912 0.828655002 0.829424418 0.831170640 0.839408861 0.844138659 0.844896285 0.849376161 0.856929293 0.861391765 0.864547872 0.869756421 0.871105008 0.883135391 0.887374376 0.890901201 0.892341909 0.915808144 0.921885770 0.930255611 0.932035986 0.963531369 0.975088296 0.976608071 0.991198853 0.999287877 1.022697238 1.034247345 1.043465539 1.050965034 1.057925748 1.083755918 1.085395097 1.088420478 1.104694257 1.106578456 1.112035899 1.122551649 1.123465062 1.134952059 1.138925923 1.167327044 1.170526092 1.178726555 1.185391027 1.194048167 1.202717471 1.219712884 1.239642071 1.246664993 1.295236660 1.312866344 1.323318157 1.325225005 1.326413008 1.332238667 1.333033907 1.340341207 1.341692062 1.355383030 1.374673675 1.378163040 1.380928777 1.380936950 1.417939836 1.550963617 1.659883269 1.674576080</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">10</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38252595" y3="0.14107427" z3="-0.2297355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44785798" y3="0.068892" z3="0.31947963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71710571" y3="0.38458758" z3="-0.43132119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83177589" y3="1.26952398" z3="-2.3497792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44707746" y3="0.57326949" z3="-1.21533008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.76059813" y3="0.98077013" z3="-3.67151196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.76718722" y3="1.82418196" z3="-3.23523602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.56908764" y3="2.77829704" z3="-4.72623547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60643657" y3="1.45072538" z3="-4.36826268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.71120947" y3="3.16304485" z3="-5.28636863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.85070084" y3="-0.3465113" z3="-3.38640836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13106492" y3="0.30653199" z3="-0.98785719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38332248" y3="-0.87574314" z3="-1.8946403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92050106" y3="-0.73424177" z3="-1.67425698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09812938" y3="-2.19115596" z3="-1.71223056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.04859027" y3="-3.75245095" z3="0.74049297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.38048286" y3="-5.19276523" z3="-4.70844743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.09752906" y3="-4.99919562" z3="-3.66976102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.63075136" y3="-4.47173828" z3="-1.04695616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.04798062" y3="-4.49433271" z3="-2.78423876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.20532245" y3="-5.26735275" z3="-3.24519394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.56963219" y3="-5.00522411" z3="-1.92638192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.69592902" y3="-4.24024985" z3="-1.45617418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.06834838" y3="-4.27403494" z3="-3.10612685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.94584356" y3="-5.66116566" z3="-3.94406027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.59702532" y3="-5.189203" z3="-1.60224273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.89985593" y3="-4.06677276" z3="0.27382728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.07379524" y3="-3.9135165" z3="0.87453106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.92098597" y3="-4.42793576" z3="0.4179241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1203079" y3="-3.7473315" z3="2.33615727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26248375" y3="-3.50739773" z3="5.12521531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30303823" y3="-4.06782228" z3="3.01832146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01164262" y3="-3.30243052" z3="3.07248193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07943609" y3="-3.18458491" z3="4.45732248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37185068" y3="-3.95187139" z3="4.40397576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.17323379" y3="-4.41803337" z3="2.45602676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0672273" y3="-3.05488593" z3="2.5816745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.19285544" y3="-2.85609563" z3="5.00709707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29665079" y3="-4.21509847" z3="4.92465307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.31460212" y3="-3.42306933" z3="6.2143177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.53826608" y3="-3.7771225" z3="-0.52487319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25414604" y3="-3.18848033" z3="-0.95782621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.42392377" y3="0.56556814" z3="-4.54166206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04556117" y3="-2.04377993" z3="-0.05484485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.02180869" y3="-1.30579357" z3="1.12588597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.03008126" y3="-0.60515447" z3="1.56653211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.69580614" y3="0.48172494" z3="1.30745993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.91133312" y3="1.39919219" z3="-0.29842146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.82742275" y3="-0.56752967" z3="1.47341081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.86508104" y3="1.62626728" z3="2.78111591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.06801695" y3="-1.37918969" z3="1.93741848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.00052598" y3="-0.74923659" z3="3.20653884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.50391261" y3="0.80364006" z3="-1.13340505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.33564623" y3="2.34198404" z3="-0.24368692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.96873297" y3="1.658199" z3="-0.48574698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.92437347" y3="-0.8946176" z3="2.52223818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.7269116" y3="0.01286088" z3="1.20195131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80472196" y3="-1.44122872" z3="0.80216153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.86292174" y3="1.05669896" z3="3.72738825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.01667743" y3="2.3339937" z3="2.81318847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.79489093" y3="2.22067789" z3="2.73368989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.1469106" y3="-1.12517643" z3="3.79254151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.94206149" y3="-1.00417414" z3="3.71112616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.91875341" y3="0.34439386" z3="3.09366174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83871686" y3="-0.54290332" z3="0.97962759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47914582" y3="-1.89445109" z3="0.9152846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79598603" y3="-2.49639606" z3="1.9653813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49111539" y3="-1.73234663" z3="3.08745434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.89713492" y3="-0.40664675" z3="3.21127081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.57745657" y3="0.1814312" z3="2.15004751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.66707937" y3="-2.45354887" z3="-0.00185396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45351593" y3="-3.52942494" z3="1.89510939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61199042" y3="-2.30515836" z3="4.11173582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.63945194" y3="0.15942129" z3="4.10705516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.86747243" y3="1.23401557" z3="2.20795947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83259806" y3="1.05182733" z3="-4.1490625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.95544116" y3="0.2357236" z3="-4.16106078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.81399487" y3="-1.08441173" z3="-4.57414834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.59193284" y3="-1.5894055" z3="-5.00603916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.52212715" y3="-0.75896362" z3="-4.99169383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.92009456" y3="2.07462025" z3="-3.77422259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92831129" y3="0.59892047" z3="-3.82840767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.97868487" y3="-1.97473284" z3="-4.51761496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.52149346" y3="-2.63008314" z3="-5.32325398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.48923401" y3="-1.15643281" z3="-5.30150221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18669941" y3="-1.56221101" z3="4.9753441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.319065" y3="-3.47909489" z3="4.02095025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.87802227" y3="-3.0759109" z3="-5.02276203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.9783311" y3="-1.5622311" z3="-3.95914159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17735975" y3="1.00133997" z3="-1.62699655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23388946" y3="1.43013938" z3="-2.60598575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56651247" y3="1.17628816" z3="-1.87387709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.01108481" y3="1.72671577" z3="-3.05086853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27934346" y3="0.8508991" z3="-1.1098585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.08245942" y3="1.85011635" z3="-3.23208151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.72843129" y3="1.97441701" z3="-3.82422381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.07788314" y3="2.11836964" z3="-4.04041153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01872778" y3="2.27028137" z3="-4.60005952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.43384978" y3="2.53229691" z3="-4.9880899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.67588337" y3="3.22417147" z3="-3.54101607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.59200425" y3="3.68458638" z3="-4.34505892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.59789048" y3="4.19062685" z3="-3.04828352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.48554974" y3="5.51792051" z3="-3.38742003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.40456174" y3="3.87220447" z3="-2.38618983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.20858105" y3="6.23872548" z3="-2.99507375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.51123876" y3="5.06160612" z3="-4.69202332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.4409326" y3="5.96125658" z3="-4.23307396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.68184246" y3="5.39410737" z3="-5.32396353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.36766667" y3="7.01841145" z3="-4.50320505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.37102261" y3="-2.61037969" z3="-0.50784394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.2152212" y3="-3.38022439" z3="-1.28202588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.94856055" y3="-3.04747295" z3="0.32310862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99752865" y3="-1.82753415" z3="-0.97399984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05498139" y3="-1.68776967" z3="-1.13101141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29603557" y3="-0.70756628" z3="-1.57887025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00702491" y3="-1.63719706" z3="-0.79650143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.08670464" y3="-2.42568041" z3="-1.94417453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3825,.1411,-.2297;7.4479,.0689,.3195;6.7171,.3846,-.4313;4.8318,1.2695,-2.3498;4.4471,.5733,-1.2153;2.7606,.9808,-3.6715;3.7672,1.8242,-3.2352;1.5691,2.7783,-4.7262;1.6064,1.4507,-4.3683;.7112,3.163,-5.2864;2.8507,-.3465,-3.3864;3.1311,.3065,-.9879;2.3833,-.8757,-1.8946;.9205,-.7342,-1.6743;3.0981,-2.1912,-1.7122;-.0486,-3.7525,.7405;.3805,-5.1928,-4.7084;.0975,-4.9992,-3.6698;-.6308,-4.4717,-1.047;1.048,-4.4943,-2.7842;-1.2053,-5.2674,-3.2452;-1.5696,-5.0052,-1.9264;.6959,-4.2402,-1.4562;2.0683,-4.274,-3.1061;-1.9458,-5.6612,-3.9441;-2.597,-5.1892,-1.6022;-.8999,-4.0668,.2738;-2.0738,-3.9135,.8745;-2.921,-4.4279,.4179;-2.1203,-3.7473,2.3362;-2.2625,-3.5074,5.1252;-3.303,-4.0678,3.0183;-1.0116,-3.3024,3.0725;-1.0794,-3.1846,4.4573;-3.3719,-3.9519,4.404;-4.1732,-4.418,2.456;-.0672,-3.0549,2.5817;-.1929,-2.8561,5.0071;-4.2967,-4.2151,4.9247;-2.3146,-3.4231,6.2143;1.5383,-3.7771,-.5249;2.2541,-3.1885,-.9578;.4239,.5656,-4.5417;-3.0456,-2.0438,-.0548;-3.0218,-1.3058,1.1259;-2.0301,-.6052,1.5665;-.6958,.4817,1.3075;-.9113,1.3992,-.2984;.8274,-.5675,1.4734;-.8651,1.6263,2.7811;-4.068,-1.3792,1.9374;-4.0005,-.7492,3.2065;-.5039,.8036,-1.1334;-.3356,2.342,-.2437;-1.9687,1.6582,-.4857;.9244,-.8946,2.5222;1.7269,.0129,1.202;.8047,-1.4412,.8022;-.8629,1.0567,3.7274;-.0167,2.334,2.8132;-1.7949,2.2207,2.7337;-3.1469,-1.1252,3.7925;-4.9421,-1.0042,3.7111;-3.9188,.3444,3.0937;4.8387,-.5429,.9796;4.4791,-1.8945,.9153;3.796,-2.4964,1.9654;3.4911,-1.7323,3.0875;3.8971,-.4066,3.2113;4.5775,.1814,2.15;4.6671,-2.4535,-.0019;3.4535,-3.5294,1.8951;2.612,-2.3052,4.1117;3.6395,.1594,4.1071;4.8675,1.234,2.208;-.8326,1.0518,-4.1491;-1.9554,.2357,-4.1611;-1.814,-1.0844,-4.5741;-.5919,-1.5894,-5.006;.5221,-.759,-4.9917;-.9201,2.0746,-3.7742;-2.9283,.5989,-3.8284;-2.9787,-1.9747,-4.5176;-.5215,-2.6301,-5.3233;1.4892,-1.1564,-5.3015;2.1867,-1.5622,4.9753;2.3191,-3.4791,4.021;-2.878,-3.0759,-5.0228;-3.9783,-1.5622,-3.9591;7.1774,1.0013,-1.627;6.2339,1.4301,-2.606;8.5665,1.1763,-1.8739;9.0111,1.7267,-3.0509;9.2793,.8509,-1.1099;10.0825,1.8501,-3.2321;6.7284,1.9744,-3.8242;8.0779,2.1184,-4.0404;6.0187,2.2703,-4.6001;8.4338,2.5323,-4.9881;3.6759,3.2242,-3.541;2.592,3.6846,-4.3451;4.5979,4.1906,-3.0483;4.4855,5.5179,-3.3874;5.4046,3.8722,-2.3862;5.2086,6.2387,-2.9951;2.5112,5.0616,-4.692;3.4409,5.9613,-4.2331;1.6818,5.3941,-5.324;3.3677,7.0184,-4.5032;-4.371,-2.6104,-.5078;-4.2152,-3.3802,-1.282;-4.9486,-3.0475,.3231;-4.9975,-1.8275,-.974;-2.055,-1.6878,-1.131;-2.296,-.7076,-1.5789;-1.007,-1.6372,-.7965;-2.0867,-2.4257,-1.9442;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648095824548</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010197591688 0.000725520848 0.027457858834 0.005337860144</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021455375 -0.001682161 0.000106518 0.000139151 0.000189368 0.000211766 0.000283098 0.000328405 0.000504356 0.000543541 0.000665238 0.000732021 0.000758252 0.000779654 0.000837296 0.000940326 0.001014593 0.001088399 0.001119833 0.001184794 0.001258195 0.001337198 0.001437723 0.001580797 0.001651963 0.001954582 0.002064731 0.002150107 0.002207988 0.002373682 0.002637745 0.002990685 0.003285837 0.003744924 0.003834054 0.004021072 0.004379970 0.005044624 0.005352106 0.005417114 0.005809492 0.006095329 0.006459860 0.007091001 0.007371334 0.007692166 0.007791367 0.008253119 0.008822890 0.009340244 0.009868920 0.011049945 0.011602348 0.012748063 0.012939118 0.013312342 0.013710166 0.014630317 0.014882001 0.015204025 0.015458728 0.016019456 0.016558591 0.016804329 0.017282042 0.017716140 0.018608736 0.019221537 0.020669403 0.020794706 0.021391336 0.022499670 0.022804658 0.024002719 0.025852489 0.026333081 0.026770836 0.028272938 0.028779964 0.030561585 0.031107725 0.031407916 0.032031343 0.033348270 0.033746557 0.036804583 0.037292135 0.038893514 0.039185587 0.040749507 0.041393581 0.043663027 0.045092252 0.048233726 0.049062136 0.049440602 0.049983292 0.050952655 0.050994941 0.052107841 0.052332590 0.052392447 0.052536993 0.053393022 0.054034651 0.054636637 0.055079540 0.055821676 0.056363001 0.056457148 0.057033599 0.057668631 0.058399097 0.059528159 0.060597822 0.060828043 0.061207629 0.061770393 0.062258479 0.064890933 0.065629927 0.065740885 0.066266264 0.071246950 0.073716550 0.074349162 0.076773196 0.078607800 0.083511987 0.084163810 0.085022678 0.086195749 0.086857883 0.089579749 0.090470098 0.091944659 0.094409541 0.094643550 0.095554125 0.095826430 0.096111551 0.097373758 0.098209099 0.098888338 0.099334161 0.099916289 0.100520866 0.101439178 0.102208017 0.102984159 0.103727380 0.104374657 0.105978866 0.106078164 0.106638825 0.108419053 0.109592787 0.110479005 0.112247890 0.113029546 0.116250655 0.118120011 0.118461674 0.120949380 0.122616339 0.123395833 0.125501220 0.126258650 0.130396688 0.131556256 0.134757741 0.141537035 0.142301598 0.144788048 0.145754123 0.146387352 0.146715048 0.147053414 0.152422968 0.155224812 0.159440742 0.170451375 0.172538096 0.174909091 0.181758936 0.182640350 0.185923723 0.186594366 0.190606522 0.192521178 0.195962768 0.197603745 0.200045836 0.204695187 0.205583952 0.206729420 0.209155199 0.209612505 0.211967874 0.214673258 0.217575410 0.223855929 0.224653830 0.228939200 0.233419858 0.234044809 0.234796743 0.242994599 0.252859021 0.256486051 0.256646727 0.262648181 0.278092004 0.282222595 0.285972739 0.286951633 0.291190849 0.298408964 0.301964470 0.302922699 0.305128938 0.311837001 0.314461749 0.320530256 0.321412132 0.327195397 0.342780897 0.344722153 0.348112591 0.348927196 0.350193428 0.354272212 0.360741830 0.361449931 0.369754112 0.380463268 0.404189519 0.421650851 0.424455597 0.450429815 0.462912355 0.468594659 0.473049578 0.473899206 0.475623104 0.479778153 0.485683583 0.503775029 0.529702910 0.558766544 0.564198738 0.568428423 0.589943800 0.592091916 0.602319747 0.635342445 0.639045257 0.641907976 0.662127976 0.668306769 0.680356293 0.683649004 0.691223995 0.694103021 0.703808242 0.704701298 0.711769706 0.737829083 0.749891061 0.759262597 0.771829445 0.776572416 0.804064465 0.808658565 0.810853726 0.813145200 0.819347936 0.820436108 0.828655004 0.829460597 0.831170773 0.839408861 0.844138748 0.844896670 0.849376186 0.856929302 0.861391935 0.864549658 0.869764932 0.871120953 0.883135744 0.887374383 0.890901204 0.892356976 0.915808140 0.921886139 0.930255634 0.932036720 0.963531500 0.975089097 0.976612061 0.991199072 0.999287885 1.022697335 1.034247534 1.043465783 1.050965035 1.057925750 1.083755921 1.085395155 1.088420481 1.104694346 1.106578461 1.112035914 1.122551682 1.123465067 1.134952093 1.138926028 1.167327058 1.170527889 1.178726659 1.185398739 1.194048179 1.202717497 1.219745739 1.239801269 1.251335851 1.295242173 1.312878505 1.323323515 1.325226211 1.326414510 1.332594396 1.333276595 1.340341250 1.341692062 1.355384941 1.374673673 1.378233973 1.380931815 1.380949446 1.417941953 1.550963656 1.659883770 1.675398485</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">11</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38251067" y3="0.13993831" z3="-0.22887082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44786692" y3="0.07049345" z3="0.32060216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71676305" y3="0.38555938" z3="-0.43011999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83040613" y3="1.26922679" z3="-2.34805055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44653389" y3="0.57133276" z3="-1.21432779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7600573" y3="0.97853559" z3="-3.67035569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.76507132" y3="1.82319529" z3="-3.23298986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.56500539" y3="2.77524987" z3="-4.72251762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60524533" y3="1.44711722" z3="-4.36679414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.70640593" y3="3.15910722" z3="-5.28218636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.85226394" y3="-0.34886453" z3="-3.38637341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13089795" y3="0.30259931" z3="-0.98719923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38384781" y3="-0.87922817" z3="-1.89534788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92088206" y3="-0.73762627" z3="-1.67577995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09838127" y3="-2.1947803" z3="-1.71324436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.05082528" y3="-3.75085324" z3="0.73967212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.37316902" y3="-5.19114659" z3="-4.7099422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.09096251" y3="-4.99680683" z3="-3.67117124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.63529653" y3="-4.46782489" z3="-1.04798892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.04294076" y3="-4.49452689" z3="-2.78575827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.21245561" y3="-5.26157917" z3="-3.24633247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.57575093" y3="-4.99863717" z3="-1.92735309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.69187629" y3="-4.23970313" z3="-1.45759474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.06384714" y3="-4.27700067" z3="-3.10785628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.95427983" y3="-5.6531605" z3="-3.94513672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.60351294" y3="-5.18010029" z3="-1.60296696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.90291994" y3="-4.06303711" z3="0.27312011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.07655981" y3="-3.907887" z3="0.87440362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.92428484" y3="-4.42198737" z3="0.41869116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12158424" y3="-3.74344942" z3="2.33651475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.26160706" y3="-3.50579551" z3="5.12598085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30429281" y3="-4.06278976" z3="3.01922013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01169937" y3="-3.3012153" z3="3.07261448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07843765" y3="-3.18444146" z3="4.45762612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37208745" y3="-3.94793119" z3="4.40502207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.17539264" y3="-4.411214" z3="2.45720678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06707893" y3="-3.05504431" z3="2.58151969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.19099071" y3="-2.85790047" z3="5.00717828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29699095" y3="-4.2101402" z3="4.92602295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.31295614" y3="-3.42220944" z3="6.21517686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.53579836" y3="-3.77910757" z3="-0.52634306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25270862" y3="-3.19187829" z3="-0.95920444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.42570672" y3="0.55866037" z3="-4.54404066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.045927" y3="-2.03817344" z3="-0.05248023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.02030286" y3="-1.29983251" z3="1.12831614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.02761908" y3="-0.60003277" z3="1.56755644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.69033951" y3="0.48332145" z3="1.30785161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.9038291" y3="1.40148278" z3="-0.29788788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.83017271" y3="-0.5698218" z3="1.47292535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.85648789" y3="1.62804796" z3="2.78169132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.0655802" y3="-1.37222974" z3="1.94092753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.99575554" y3="-0.7432697" z3="3.21048091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.49801851" y3="0.80486055" z3="-1.13289457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.32559183" y3="2.34268461" z3="-0.24306587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.96049541" y3="1.66339912" z3="-0.48510225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.92643901" y3="-0.89803869" z3="2.52144042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.73090119" y3="0.00881598" z3="1.20182843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80552972" y3="-1.44283979" z3="0.80089799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.85517656" y3="1.0583972" z3="3.7279151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-0.00655792" y3="2.33395105" z3="2.81346401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.78504492" y3="2.22445407" z3="2.73469729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.14206495" y3="-1.12105002" z3="3.79519208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.93709659" y3="-0.99718121" z3="3.71590904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.91239488" y3="0.35029825" z3="3.09829601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8394488" y3="-0.54494728" z3="0.98028183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47888534" y3="-1.89618409" z3="0.91497622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79609192" y3="-2.49857958" z3="1.96504127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49257572" y3="-1.7353139" z3="3.0880219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.89965444" y3="-0.41002816" z3="3.21275723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.57964689" y3="0.17850677" z3="2.15157006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.66561146" y3="-2.45455931" z3="-0.00285704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45279434" y3="-3.53128952" z3="1.89407884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61352209" y3="-2.30831307" z3="4.11226151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.64297699" y3="0.15543399" z3="4.10920827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.87043194" y3="1.2308399" z3="2.2101799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83283623" y3="1.03891662" z3="-4.15035947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.95288558" y3="0.21895002" z3="-4.16859202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.80696441" y3="-1.09873593" z3="-4.58947936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.58256339" y3="-1.59776806" z3="-5.02137685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.52892568" y3="-0.7635825" z3="-5.00033472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.92429128" y3="2.0596709" z3="-3.77001666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92714777" y3="0.57728473" z3="-3.83449308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.96980719" y3="-1.99119298" z3="-4.53758796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.50817087" y3="-2.63657502" z3="-5.34428422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.49801865" y3="-1.15628372" z3="-5.31030476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18943443" y3="-1.56577832" z3="4.97685482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31940279" y3="-3.48190425" z3="4.02044547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.86663361" y3="-3.08974441" z3="-5.03371169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.97114464" y3="-1.58130711" z3="-3.98659945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17628555" y3="1.00372174" z3="-1.625348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23228858" y3="1.43204793" z3="-2.60403355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56521462" y3="1.18063369" z3="-1.87207708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.00909097" y3="1.7325331" z3="-3.04864512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27845435" y3="0.85554174" z3="-1.10831421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.08031178" y3="1.85738827" z3="-3.22977354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.72612485" y3="1.97801949" z3="-3.82180204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.07539958" y3="2.1238356" z3="-4.03786882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01604216" y3="2.27361338" z3="-4.59740168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.43085982" y3="2.53896138" z3="-4.98521487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.67130854" y3="3.22337134" z3="-3.53711783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.58633774" y3="3.68292683" z3="-4.34022039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.59192242" y3="4.19072469" z3="-3.04355273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.47733636" y3="5.51821815" z3="-3.38111297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.39933744" y3="3.8728045" z3="-2.38211328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.19932827" y3="6.23973267" z3="-2.98816403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.50331974" y3="5.06020897" z3="-4.68562448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.43175672" y3="5.96080376" z3="-4.22597577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.67332395" y3="5.39211812" z3="-5.3170908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.35679135" y3="7.01811704" z3="-4.49498479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.37288451" y3="-2.60247033" z3="-0.5042307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.21897396" y3="-3.37357405" z3="-1.27754993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95093587" y3="-3.03725031" z3="0.32758652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-4.99804336" y3="-1.81890244" z3="-0.97113423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05677847" y3="-1.68224215" z3="-1.13016317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29582292" y3="-0.70044211" z3="-1.57578002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0079732" y3="-1.63553866" z3="-0.79777722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.09264029" y3="-2.41814347" z3="-1.9449188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3825,.1399,-.2289;7.4479,.0705,.3206;6.7168,.3856,-.4301;4.8304,1.2692,-2.3481;4.4465,.5713,-1.2143;2.7601,.9785,-3.6704;3.7651,1.8232,-3.233;1.565,2.7752,-4.7225;1.6052,1.4471,-4.3668;.7064,3.1591,-5.2822;2.8523,-.3489,-3.3864;3.1309,.3026,-.9872;2.3838,-.8792,-1.8953;.9209,-.7376,-1.6758;3.0984,-2.1948,-1.7132;-.0508,-3.7509,.7397;.3732,-5.1911,-4.7099;.091,-4.9968,-3.6712;-.6353,-4.4678,-1.048;1.0429,-4.4945,-2.7858;-1.2125,-5.2616,-3.2463;-1.5758,-4.9986,-1.9274;.6919,-4.2397,-1.4576;2.0638,-4.277,-3.1079;-1.9543,-5.6532,-3.9451;-2.6035,-5.1801,-1.603;-.9029,-4.063,.2731;-2.0766,-3.9079,.8744;-2.9243,-4.422,.4187;-2.1216,-3.7434,2.3365;-2.2616,-3.5058,5.126;-3.3043,-4.0628,3.0192;-1.0117,-3.3012,3.0726;-1.0784,-3.1844,4.4576;-3.3721,-3.9479,4.405;-4.1754,-4.4112,2.4572;-.0671,-3.055,2.5815;-.191,-2.8579,5.0072;-4.297,-4.2101,4.926;-2.313,-3.4222,6.2152;1.5358,-3.7791,-.5263;2.2527,-3.1919,-.9592;.4257,.5587,-4.544;-3.0459,-2.0382,-.0525;-3.0203,-1.2998,1.1283;-2.0276,-.6,1.5676;-.6903,.4833,1.3079;-.9038,1.4015,-.2979;.8302,-.5698,1.4729;-.8565,1.628,2.7817;-4.0656,-1.3722,1.9409;-3.9958,-.7433,3.2105;-.498,.8049,-1.1329;-.3256,2.3427,-.2431;-1.9605,1.6634,-.4851;.9264,-.898,2.5214;1.7309,.0088,1.2018;.8055,-1.4428,.8009;-.8552,1.0584,3.7279;-.0066,2.334,2.8135;-1.785,2.2245,2.7347;-3.1421,-1.1211,3.7952;-4.9371,-.9972,3.7159;-3.9124,.3503,3.0983;4.8394,-.5449,.9803;4.4789,-1.8962,.915;3.7961,-2.4986,1.965;3.4926,-1.7353,3.088;3.8997,-.41,3.2128;4.5796,.1785,2.1516;4.6656,-2.4546,-.0029;3.4528,-3.5313,1.8941;2.6135,-2.3083,4.1123;3.643,.1554,4.1092;4.8704,1.2308,2.2102;-.8328,1.0389,-4.1504;-1.9529,.219,-4.1686;-1.807,-1.0987,-4.5895;-.5826,-1.5978,-5.0214;.5289,-.7636,-5.0003;-.9243,2.0597,-3.77;-2.9271,.5773,-3.8345;-2.9698,-1.9912,-4.5376;-.5082,-2.6366,-5.3443;1.498,-1.1563,-5.3103;2.1894,-1.5658,4.9769;2.3194,-3.4819,4.0204;-2.8666,-3.0897,-5.0337;-3.9711,-1.5813,-3.9866;7.1763,1.0037,-1.6253;6.2323,1.432,-2.604;8.5652,1.1806,-1.8721;9.0091,1.7325,-3.0486;9.2785,.8555,-1.1083;10.0803,1.8574,-3.2298;6.7261,1.978,-3.8218;8.0754,2.1238,-4.0379;6.016,2.2736,-4.5974;8.4309,2.539,-4.9852;3.6713,3.2234,-3.5371;2.5863,3.6829,-4.3402;4.5919,4.1907,-3.0436;4.4773,5.5182,-3.3811;5.3993,3.8728,-2.3821;5.1993,6.2397,-2.9882;2.5033,5.0602,-4.6856;3.4318,5.9608,-4.226;1.6733,5.3921,-5.3171;3.3568,7.0181,-4.495;-4.3729,-2.6025,-.5042;-4.219,-3.3736,-1.2775;-4.9509,-3.0373,.3276;-4.998,-1.8189,-.9711;-2.0568,-1.6822,-1.1302;-2.2958,-.7004,-1.5758;-1.008,-1.6355,-.7978;-2.0926,-2.4181,-1.9449;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648120532924</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006833129476 0.000506922816 0.048951743851 0.005336083726</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021456697 -0.001393917 0.000106511 0.000139167 0.000189647 0.000213026 0.000283556 0.000328886 0.000504499 0.000544921 0.000665527 0.000736279 0.000758488 0.000780961 0.000837660 0.000940438 0.001016564 0.001088394 0.001121247 0.001191632 0.001258486 0.001339328 0.001437795 0.001585330 0.001652604 0.001957126 0.002064709 0.002150093 0.002208258 0.002373674 0.002637737 0.002991147 0.003285811 0.003745184 0.003834052 0.004021148 0.004379873 0.005045147 0.005352121 0.005425875 0.005818537 0.006096460 0.006463914 0.007142329 0.007555014 0.007758552 0.008094250 0.008607647 0.008851355 0.009345696 0.009870518 0.011053949 0.011604684 0.012749459 0.012942145 0.013318605 0.013711564 0.014663752 0.014882746 0.015206155 0.015461957 0.016020403 0.016560495 0.016813816 0.017291762 0.017718460 0.018615481 0.019223017 0.020679194 0.020799126 0.021447926 0.022577302 0.022818326 0.024004620 0.025852538 0.026333135 0.026771207 0.028272934 0.028780200 0.030569005 0.031125834 0.031409672 0.032034500 0.033348280 0.033746550 0.036805838 0.037292166 0.038894063 0.039185605 0.040749690 0.041396272 0.043663105 0.045092270 0.048234138 0.049062137 0.049440778 0.049983291 0.050952963 0.050994990 0.052107873 0.052332591 0.052392450 0.052537191 0.053393028 0.054034772 0.054636652 0.055079659 0.055822225 0.056362997 0.056457151 0.057033934 0.057674444 0.058402887 0.059528182 0.060597819 0.060828222 0.061208432 0.061770633 0.062258479 0.064890929 0.065630329 0.065741457 0.066267163 0.071251036 0.073717365 0.074351523 0.076774707 0.078620938 0.083514551 0.084172193 0.085022677 0.086195952 0.086859162 0.089580660 0.090470624 0.091952492 0.094410732 0.094645191 0.095554171 0.095826547 0.096113241 0.097373824 0.098209105 0.098888874 0.099334290 0.099916376 0.100520888 0.101439188 0.102208148 0.102984133 0.103727349 0.104374655 0.105979563 0.106079651 0.106638861 0.108419191 0.109592815 0.110479044 0.112247832 0.113029592 0.116255361 0.118120073 0.118462354 0.120949852 0.122648252 0.123395836 0.125506531 0.126267298 0.130396846 0.131556191 0.134757780 0.141537042 0.142301764 0.144791106 0.145755349 0.146389564 0.146719390 0.147054504 0.152422961 0.155227070 0.159440767 0.170456394 0.172538094 0.174911996 0.181765518 0.182640543 0.185923721 0.186594342 0.190606514 0.192521111 0.195964200 0.197603841 0.200045803 0.204695390 0.205583952 0.206729575 0.209166328 0.209612532 0.211967938 0.214673325 0.217575902 0.223855992 0.224653991 0.228941737 0.233420490 0.234045233 0.234796736 0.242994826 0.252859257 0.256486155 0.256647648 0.262653778 0.278092458 0.282222595 0.285972739 0.286957997 0.291191205 0.298417284 0.301974412 0.302923001 0.305128946 0.311843502 0.314462027 0.320530168 0.321412151 0.327212274 0.342783538 0.344794874 0.348137666 0.348927210 0.350194186 0.354272269 0.360741880 0.361450768 0.369754213 0.380523909 0.404229108 0.421653598 0.424455608 0.450429831 0.462998902 0.468594878 0.473116536 0.473960644 0.475624802 0.479927722 0.485683616 0.503918500 0.529844904 0.559082576 0.564271450 0.568659050 0.589943820 0.592092022 0.602326157 0.635342455 0.639045321 0.641945074 0.662128037 0.668367088 0.680356334 0.683649179 0.691223998 0.694103008 0.703808325 0.704704247 0.711806767 0.737839113 0.749891210 0.759262596 0.771829659 0.776572893 0.804064474 0.808658579 0.810853834 0.813145202 0.819363693 0.820436278 0.828655025 0.829489445 0.831170970 0.839408936 0.844138769 0.844896963 0.849376192 0.856929393 0.861391940 0.864551130 0.869770557 0.871137992 0.883136081 0.887374390 0.890901296 0.892370329 0.915808134 0.921886483 0.930255644 0.932037421 0.963531554 0.975089523 0.976617280 0.991199067 0.999287923 1.022697367 1.034247531 1.043466177 1.050965054 1.057925749 1.083755951 1.085395238 1.088420492 1.104694436 1.106578469 1.112035919 1.122551720 1.123465067 1.134952122 1.138926046 1.167327061 1.170529039 1.178726742 1.185404404 1.194048187 1.202717661 1.219764186 1.239857032 1.254714969 1.295247630 1.312889648 1.323329102 1.325227795 1.326415666 1.332712668 1.333617552 1.340341302 1.341692065 1.355386280 1.374673675 1.378327893 1.380932355 1.380970774 1.417943605 1.550963678 1.659884301 1.676265095</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">12</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38233382" y3="0.13895882" z3="-0.22799777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.4476737" y3="0.07204269" z3="0.32186184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71630253" y3="0.38646198" z3="-0.42887402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82913723" y3="1.26870181" z3="-2.34661727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44595992" y3="0.56947414" z3="-1.21348938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7596411" y3="0.97610411" z3="-3.66976857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.76318713" y3="1.82190975" z3="-3.23129554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.56161744" y3="2.77205155" z3="-4.7198775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60436753" y3="1.44349487" z3="-4.3662208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.70236529" y3="3.15505233" z3="-5.27912417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.85363434" y3="-0.35138541" z3="-3.3865476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13064751" y3="0.2989234" z3="-0.98678281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.384272" y3="-0.88250289" z3="-1.89610393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92117204" y3="-0.74094607" z3="-1.67736216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09847155" y3="-2.19825544" z3="-1.71398692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.05266523" y3="-3.74923206" z3="0.73872343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.3663522" y3="-5.18876782" z3="-4.7114262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.08489982" y3="-4.99391121" z3="-3.67255015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.639336" y3="-4.46433766" z3="-1.04898804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.03827649" y3="-4.49421732" z3="-2.78727019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.21910796" y3="-5.2557697" z3="-3.24749059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.58137958" y3="-4.9924676" z3="-1.92830978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.68821734" y3="-4.23911751" z3="-1.45885293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.05961734" y3="-4.27902097" z3="-3.10955184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.96174575" y3="-5.64586609" z3="-3.94620886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.60941098" y3="-5.17181635" z3="-1.60359848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.90553423" y3="-4.05985109" z3="0.27251284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.07829129" y3="-3.9043953" z3="0.87493015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.92726656" y3="-4.41637108" z3="0.41890052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12261337" y3="-3.7402393" z3="2.33691318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.261004" y3="-3.50411703" z3="5.12654305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30548486" y3="-4.05834598" z3="3.01995756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01180581" y3="-3.29986389" z3="3.07272266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07773488" y3="-3.18387504" z3="4.45782253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37244063" y3="-3.94427426" z3="4.40585829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.1773077" y3="-4.40528035" z3="2.458161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06712492" y3="-3.05465973" z3="2.58128183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.18960655" y3="-2.85888119" z3="5.00717276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29742093" y3="-4.20561852" z3="4.92715483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.3116762" y3="-3.42122963" z3="6.21582288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.53353445" y3="-3.78103878" z3="-0.52770245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25143827" y3="-3.19486523" z3="-0.96039411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.42722629" y3="0.55255928" z3="-4.54628353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04706247" y3="-2.03158293" z3="-0.0511384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01901213" y3="-1.29443355" z3="1.13005942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.02505159" y3="-0.59579821" z3="1.56878401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.68576333" y3="0.484568" z3="1.30817775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.8972706" y3="1.4032389" z3="-0.29757197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8328256" y3="-0.57145571" z3="1.47254374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.84857478" y3="1.62985035" z3="2.78195647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.06364038" y3="-1.36600271" z3="1.94375641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.99173224" y3="-0.73795766" z3="3.21358619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.49313299" y3="0.80551333" z3="-1.13261541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.31658013" y3="2.34294504" z3="-0.24288843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.95329815" y3="1.667862" z3="-0.48460273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.92858478" y3="-0.90039899" z3="2.52087163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.73450538" y3="0.00581378" z3="1.20170433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80662671" y3="-1.44402826" z3="0.7999968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.84781741" y3="1.06031953" z3="3.72825103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.00281374" y3="2.33402015" z3="2.81306101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.7759592" y3="2.22811635" z3="2.73548671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.1380077" y3="-1.11720665" z3="3.79729519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.93292976" y3="-0.99093607" z3="3.71976975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.90703845" y3="0.35558007" z3="3.10204677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83991462" y3="-0.54665065" z3="0.98101615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47859786" y3="-1.89765317" z3="0.91495806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7961572" y3="-2.50043092" z3="1.96502082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49372434" y3="-1.73780576" z3="3.08873609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.90162569" y3="-0.41284944" z3="3.21420011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58131657" y3="0.17607488" z3="2.15302513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.66435224" y3="-2.4554431" z3="-0.00343677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45223043" y3="-3.53289634" z3="1.89352671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61468381" y3="-2.31094067" z3="4.11291168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.64573269" y3="0.15212943" z3="4.111183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.87267901" y3="1.22821949" z3="2.21220963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83269364" y3="1.02759933" z3="-4.1510396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.95027649" y3="0.20441806" z3="-4.17162213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.8002334" y3="-1.11078889" z3="-4.59721076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.57451736" y3="-1.60419992" z3="-5.03227266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.53451559" y3="-0.7674061" z3="-5.00759609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.92692817" y3="2.04673904" z3="-3.76773789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92595925" y3="0.55844104" z3="-3.83718836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.96018833" y3="-2.00781636" z3="-4.55319785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.49729231" y3="-2.64089417" z3="-5.36073074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.50464592" y3="-1.15603106" z3="-5.31946321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19144558" y3="-1.56876126" z3="4.97818653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3196807" y3="-3.48423488" z3="4.02033506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.85747344" y3="-3.09623211" z3="-5.08266344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.95867129" y3="-1.61262808" z3="-3.98133452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1752437" y3="1.00578056" z3="-1.6237236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.23083509" y3="1.43356458" z3="-2.60225089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56398666" y3="1.18447655" z3="-1.87022267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.00730957" y3="1.7376647" z3="-3.0463947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27755406" y3="0.85970194" z3="-1.10663043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.07839928" y3="1.86384775" z3="-3.22737746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.72412095" y3="1.98104282" z3="-3.81956269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.07324183" y3="2.12860245" z3="-4.03540842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01374785" y3="2.27636831" z3="-4.59500065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.42829626" y3="2.54482706" z3="-4.98242478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.66724823" y3="3.22225597" z3="-3.53398082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.5813589" y3="3.68101687" z3="-4.33630002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.58660612" y3="4.19046519" z3="-3.0397421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.47003146" y3="5.51811625" z3="-3.37601571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.39472849" y3="3.87307107" z3="-2.37891305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.19121576" y3="6.24026249" z3="-2.98274725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.49612972" y3="5.05855854" z3="-4.68015237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.42347161" y3="5.96003554" z3="-4.22000986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.66542443" y3="5.38990303" z3="-5.31098782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.34693099" y3="7.0174936" z3="-4.48803474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.37497696" y3="-2.59481112" z3="-0.50124959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.22298662" y3="-3.36227027" z3="-1.27841276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95051449" y3="-3.03309746" z3="0.33033785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.00214043" y3="-1.80977143" z3="-0.96262237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.05817708" y3="-1.67692218" z3="-1.12936693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29553538" y3="-0.69423003" z3="-1.57368499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.00891925" y3="-1.63290254" z3="-0.79818482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.09690882" y3="-2.41158311" z3="-1.94498458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3823,.139,-.228;7.4477,.072,.3219;6.7163,.3865,-.4289;4.8291,1.2687,-2.3466;4.446,.5695,-1.2135;2.7596,.9761,-3.6698;3.7632,1.8219,-3.2313;1.5616,2.7721,-4.7199;1.6044,1.4435,-4.3662;.7024,3.1551,-5.2791;2.8536,-.3514,-3.3865;3.1306,.2989,-.9868;2.3843,-.8825,-1.8961;.9212,-.7409,-1.6774;3.0985,-2.1983,-1.714;-.0527,-3.7492,.7387;.3664,-5.1888,-4.7114;.0849,-4.9939,-3.6726;-.6393,-4.4643,-1.049;1.0383,-4.4942,-2.7873;-1.2191,-5.2558,-3.2475;-1.5814,-4.9925,-1.9283;.6882,-4.2391,-1.4589;2.0596,-4.279,-3.1096;-1.9617,-5.6459,-3.9462;-2.6094,-5.1718,-1.6036;-.9055,-4.0599,.2725;-2.0783,-3.9044,.8749;-2.9273,-4.4164,.4189;-2.1226,-3.7402,2.3369;-2.261,-3.5041,5.1265;-3.3055,-4.0583,3.02;-1.0118,-3.2999,3.0727;-1.0777,-3.1839,4.4578;-3.3724,-3.9443,4.4059;-4.1773,-4.4053,2.4582;-.0671,-3.0547,2.5813;-.1896,-2.8589,5.0072;-4.2974,-4.2056,4.9272;-2.3117,-3.4212,6.2158;1.5335,-3.781,-.5277;2.2514,-3.1949,-.9604;.4272,.5526,-4.5463;-3.0471,-2.0316,-.0511;-3.019,-1.2944,1.1301;-2.0251,-.5958,1.5688;-.6858,.4846,1.3082;-.8973,1.4032,-.2976;.8328,-.5715,1.4725;-.8486,1.6299,2.782;-4.0636,-1.366,1.9438;-3.9917,-.738,3.2136;-.4931,.8055,-1.1326;-.3166,2.3429,-.2429;-1.9533,1.6679,-.4846;.9286,-.9004,2.5209;1.7345,.0058,1.2017;.8066,-1.444,.8;-.8478,1.0603,3.7283;.0028,2.334,2.8131;-1.776,2.2281,2.7355;-3.138,-1.1172,3.7973;-4.9329,-.9909,3.7198;-3.907,.3556,3.102;4.8399,-.5467,.981;4.4786,-1.8977,.915;3.7962,-2.5004,1.965;3.4937,-1.7378,3.0887;3.9016,-.4128,3.2142;4.5813,.1761,2.153;4.6644,-2.4554,-.0034;3.4522,-3.5329,1.8935;2.6147,-2.3109,4.1129;3.6457,.1521,4.1112;4.8727,1.2282,2.2122;-.8327,1.0276,-4.151;-1.9503,.2044,-4.1716;-1.8002,-1.1108,-4.5972;-.5745,-1.6042,-5.0323;.5345,-.7674,-5.0076;-.9269,2.0467,-3.7677;-2.926,.5584,-3.8372;-2.9602,-2.0078,-4.5532;-.4973,-2.6409,-5.3607;1.5046,-1.156,-5.3195;2.1914,-1.5688,4.9782;2.3197,-3.4842,4.0203;-2.8575,-3.0962,-5.0827;-3.9587,-1.6126,-3.9813;7.1752,1.0058,-1.6237;6.2308,1.4336,-2.6023;8.564,1.1845,-1.8702;9.0073,1.7377,-3.0464;9.2776,.8597,-1.1066;10.0784,1.8638,-3.2274;6.7241,1.981,-3.8196;8.0732,2.1286,-4.0354;6.0137,2.2764,-4.595;8.4283,2.5448,-4.9824;3.6672,3.2223,-3.534;2.5814,3.681,-4.3363;4.5866,4.1905,-3.0397;4.47,5.5181,-3.376;5.3947,3.8731,-2.3789;5.1912,6.2403,-2.9827;2.4961,5.0586,-4.6802;3.4235,5.96,-4.22;1.6654,5.3899,-5.311;3.3469,7.0175,-4.488;-4.375,-2.5948,-.5012;-4.223,-3.3623,-1.2784;-4.9505,-3.0331,.3303;-5.0021,-1.8098,-.9626;-2.0582,-1.6769,-1.1294;-2.2955,-.6942,-1.5737;-1.0089,-1.6329,-.7982;-2.0969,-2.4116,-1.945;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648142928640</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007479674080 0.000535572874 0.022964587174 0.005337606764</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021458488 -0.000997832 0.000106803 0.000139168 0.000189731 0.000214311 0.000284036 0.000329133 0.000504528 0.000544892 0.000665601 0.000737645 0.000759052 0.000782445 0.000837662 0.000940642 0.001017192 0.001088396 0.001121611 0.001194263 0.001258561 0.001340364 0.001438100 0.001588724 0.001653507 0.001960728 0.002065168 0.002152489 0.002208819 0.002373705 0.002637771 0.002991308 0.003285936 0.003745150 0.003834047 0.004021139 0.004379950 0.005045155 0.005353001 0.005429182 0.005821986 0.006096516 0.006463929 0.007149045 0.007567049 0.007763529 0.008138188 0.008800128 0.009153329 0.009373669 0.009876703 0.011057738 0.011607112 0.012749335 0.012946110 0.013324780 0.013712362 0.014683323 0.014883337 0.015207534 0.015463944 0.016020830 0.016562528 0.016819458 0.017296469 0.017720323 0.018619227 0.019223900 0.020684268 0.020801695 0.021482651 0.022627549 0.022835417 0.024005867 0.025852572 0.026333213 0.026771377 0.028272932 0.028780398 0.030573989 0.031139287 0.031411102 0.032036644 0.033348283 0.033746544 0.036806854 0.037292302 0.038894487 0.039185574 0.040749770 0.041398560 0.043663137 0.045092293 0.048234479 0.049062147 0.049440879 0.049983298 0.050953477 0.050995270 0.052107901 0.052332590 0.052392449 0.052537268 0.053393044 0.054034812 0.054636640 0.055079698 0.055822667 0.056362993 0.056457148 0.057034198 0.057679096 0.058405920 0.059528207 0.060597866 0.060828426 0.061209103 0.061770768 0.062258479 0.064890925 0.065630315 0.065742036 0.066268004 0.071254205 0.073717919 0.074353420 0.076775339 0.078631789 0.083516203 0.084178803 0.085022706 0.086196086 0.086860504 0.089581323 0.090471022 0.091958243 0.094411678 0.094646556 0.095554164 0.095826681 0.096114450 0.097373875 0.098209108 0.098889526 0.099334263 0.099916385 0.100521098 0.101439217 0.102208171 0.102984466 0.103727362 0.104374652 0.105980441 0.106082102 0.106638880 0.108420034 0.109593116 0.110479080 0.112248003 0.113029689 0.116259406 0.118120024 0.118463745 0.120950052 0.122674980 0.123395828 0.125511241 0.126275006 0.130397002 0.131556130 0.134757803 0.141537081 0.142301752 0.144791566 0.145755430 0.146389995 0.146719146 0.147054469 0.152422805 0.155227249 0.159440842 0.170461996 0.172538095 0.174914283 0.181769474 0.182640594 0.185923726 0.186594328 0.190606507 0.192521084 0.195965934 0.197603830 0.200045829 0.204695382 0.205583965 0.206729705 0.209173971 0.209612547 0.211967900 0.214673747 0.217576570 0.223856155 0.224654076 0.228943855 0.233420753 0.234045857 0.234796737 0.242995046 0.252859286 0.256486190 0.256648208 0.262658124 0.278092760 0.282222597 0.285972756 0.286962788 0.291191509 0.298424323 0.301982796 0.302923240 0.305128952 0.311848865 0.314462244 0.320530109 0.321412160 0.327226241 0.342785837 0.344858566 0.348158017 0.348927288 0.350195034 0.354272310 0.360741918 0.361451535 0.369754276 0.380578866 0.404264618 0.421656051 0.424456520 0.450429851 0.463067273 0.468595063 0.473159022 0.474021706 0.475626182 0.480053195 0.485683604 0.504033103 0.529956136 0.559324247 0.564329914 0.568859009 0.589943818 0.592092113 0.602331545 0.635342764 0.639045680 0.641975140 0.662128108 0.668414433 0.680356341 0.683649420 0.691224002 0.694103078 0.703808397 0.704707092 0.711836972 0.737847295 0.749891321 0.759262606 0.771829799 0.776573321 0.804064473 0.808658580 0.810853831 0.813145203 0.819375658 0.820436360 0.828655039 0.829512126 0.831171346 0.839408979 0.844138793 0.844897161 0.849376215 0.856929454 0.861391940 0.864552197 0.869774381 0.871151741 0.883136509 0.887374390 0.890901303 0.892380212 0.915808214 0.921886718 0.930255645 0.932037935 0.963531612 0.975089957 0.976620714 0.991199072 0.999287929 1.022697411 1.034247557 1.043466421 1.050965052 1.057925744 1.083755981 1.085395227 1.088420524 1.104694493 1.106578479 1.112035929 1.122551750 1.123465067 1.134952146 1.138926053 1.167327068 1.170530014 1.178726783 1.185409048 1.194048196 1.202717703 1.219777960 1.239884280 1.257644869 1.295252705 1.312898764 1.323333183 1.325228742 1.326416803 1.332757092 1.333956718 1.340341343 1.341692066 1.355387640 1.374673675 1.378390770 1.380932476 1.380986775 1.417945564 1.550963697 1.659884575 1.676905792</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">13</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38211713" y3="0.13792798" z3="-0.22706494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44740505" y3="0.07366715" z3="0.3232918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71579261" y3="0.38741584" z3="-0.42748828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82788615" y3="1.26826753" z3="-2.34504475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44536116" y3="0.5676055" z3="-1.21257282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7593132" y3="0.9738046" z3="-3.66888256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.76136349" y3="1.8207691" z3="-3.22942802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.5579515" y3="2.76885722" z3="-4.71677428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60344651" y3="1.43992097" z3="-4.36505928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.69801736" y3="3.15088542" z3="-5.27565233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.8552521" y3="-0.35377628" z3="-3.38660673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13038419" y3="0.29517891" z3="-0.98629944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38481889" y3="-0.88591802" z3="-1.89689165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92155124" y3="-0.74446386" z3="-1.67902125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09886115" y3="-2.20174796" z3="-1.71494895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.05463998" y3="-3.74723947" z3="0.73740083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.35862646" y3="-5.18488253" z3="-4.71371201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.07811127" y3="-4.98986313" z3="-3.67461751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.64373561" y3="-4.46016342" z3="-1.05038274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.03306359" y3="-4.49305993" z3="-2.78940887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.22633474" y3="-5.2488598" z3="-3.24918544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.58741576" y3="-4.98541158" z3="-1.92969288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.68420455" y3="-4.23803042" z3="-1.460682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.05480682" y3="-4.28018439" z3="-3.11196033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.97014628" y3="-5.63682982" z3="-3.9478559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.61570107" y3="-5.16263986" z3="-1.60461928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.90833966" y3="-4.05607969" z3="0.27153874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.08064876" y3="-3.89940599" z3="0.87483271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.93013414" y3="-4.41081239" z3="0.41938301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12363248" y3="-3.73687238" z3="2.33716167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.260213" y3="-3.50270552" z3="5.12708151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30650274" y3="-4.05399807" z3="3.02063083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01180236" y3="-3.2987065" z3="3.07273509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07684689" y3="-3.18364125" z3="4.45797196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37259768" y3="-3.94086674" z3="4.40665044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.1790763" y3="-4.39939213" z3="2.45903949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06700745" y3="-3.05457373" z3="2.58098269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.18800817" y3="-2.86025447" z3="5.00712886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29766237" y3="-4.20135884" z3="4.92822347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.31022522" y3="-3.4204945" z3="6.21644165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.53116236" y3="-3.78292464" z3="-0.52949572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.25015636" y3="-3.19806248" z3="-0.96192952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.42919252" y3="0.54592405" z3="-4.54840486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0478115" y3="-2.02596651" z3="-0.0480228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.0176836" y3="-1.28862332" z3="1.13318757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.02281345" y3="-0.59071423" z3="1.57049111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.68079404" y3="0.48621592" z3="1.30873859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.89055987" y3="1.40501638" z3="-0.29714519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.83522768" y3="-0.57349396" z3="1.47193233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.84017885" y3="1.63196574" z3="2.78247372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.06136642" y3="-1.35932022" z3="1.9480137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.98728054" y3="-0.73211183" z3="3.21814641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.4880907" y3="0.80594747" z3="-1.13205576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.30736856" y3="2.3431841" z3="-0.24282038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.94590937" y3="1.67237108" z3="-0.48404437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9307717" y3="-0.9033489" z3="2.51998049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.7380325" y3="0.0019625" z3="1.20097054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80666035" y3="-1.44548282" z3="0.7987061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.83986078" y3="1.06254083" z3="3.72883154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.01263399" y3="2.33442909" z3="2.81283696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.76641256" y3="2.23205729" z3="2.73662231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.13345732" y3="-1.11300078" z3="3.80064863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.92829585" y3="-0.98412944" z3="3.72513306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.90115025" y3="0.36135479" z3="3.10713189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84034003" y3="-0.54848958" z3="0.98175772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.478261" y3="-1.89925189" z3="0.91488886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79627121" y3="-2.50248434" z3="1.96497619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49498733" y3="-1.74056002" z3="3.08948311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.90368485" y3="-0.41592618" z3="3.21570718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58300357" y3="0.17344617" z3="2.15453502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.66296972" y3="-2.45640258" z3="-0.00411426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45175809" y3="-3.53471804" z3="1.89293738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61610571" y3="-2.31392039" z3="4.11367328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.64866969" y3="0.14850691" z3="4.1132863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.87497404" y3="1.22539026" z3="2.21433487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83251468" y3="1.01470507" z3="-4.15139901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.94728092" y3="0.18759079" z3="-4.17754037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.7926701" y3="-1.12485678" z3="-4.61142392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.56481981" y3="-1.61193178" z3="-5.04695826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.54154602" y3="-0.77146682" z3="-5.01593947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.93043936" y3="2.03175739" z3="-3.76299848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92429721" y3="0.53659715" z3="-3.84158447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.95048612" y3="-2.02476827" z3="-4.574773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.48407502" y3="-2.64647896" z3="-5.38125259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.51338829" y3="-1.15508538" z3="-5.32867851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19357903" y3="-1.57206469" z3="4.97956873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32046702" y3="-3.4869879" z3="4.02046933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.84602016" y3="-3.10798503" z3="-5.10483536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.9493717" y3="-1.63559267" z3="-4.00386712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17417529" y3="1.00796681" z3="-1.62190862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.22938317" y3="1.43518297" z3="-2.60030596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56272462" y3="1.1885623" z3="-1.86809948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.00550659" y3="1.74308958" z3="-3.04384437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27659705" y3="0.86416087" z3="-1.1046357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.07646228" y3="1.87070864" z3="-3.22460816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.72212305" y3="1.9841627" z3="-3.81715854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.07108681" y3="2.13356324" z3="-4.03271205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0114728" y3="2.2791192" z3="-4.59248848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.42575371" y3="2.5508912" z3="-4.97938559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.66310568" y3="3.22124568" z3="-3.53071589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.57616283" y3="3.67913097" z3="-4.33213987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.58116263" y3="4.19034791" z3="-3.03583622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.4623916" y3="5.51817382" z3="-3.37065605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.39006978" y3="3.87348692" z3="-2.37571403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.18266206" y3="6.2410136" z3="-2.97698029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.48862442" y3="5.05690775" z3="-4.67441706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.41475686" y3="5.95934669" z3="-4.21369312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.65717613" y3="5.38762815" z3="-5.30459575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.33645079" y3="7.0169728" z3="-4.48055639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.37734954" y3="-2.58747733" z3="-0.49573806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.22778853" y3="-3.35614555" z3="-1.27231243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95184375" y3="-3.02487652" z3="0.33727564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.00451123" y3="-1.80171703" z3="-0.95640404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.06049408" y3="-1.67139094" z3="-1.12782332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29660716" y3="-0.6875384" z3="-1.57037062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.01047373" y3="-1.6302364" z3="-0.79845961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.1026149" y3="-2.40449319" z3="-1.94457724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3821,.1379,-.2271;7.4474,.0737,.3233;6.7158,.3874,-.4275;4.8279,1.2683,-2.345;4.4454,.5676,-1.2126;2.7593,.9738,-3.6689;3.7614,1.8208,-3.2294;1.558,2.7689,-4.7168;1.6034,1.4399,-4.3651;.698,3.1509,-5.2757;2.8553,-.3538,-3.3866;3.1304,.2952,-.9863;2.3848,-.8859,-1.8969;.9216,-.7445,-1.679;3.0989,-2.2017,-1.7149;-.0546,-3.7472,.7374;.3586,-5.1849,-4.7137;.0781,-4.9899,-3.6746;-.6437,-4.4602,-1.0504;1.0331,-4.4931,-2.7894;-1.2263,-5.2489,-3.2492;-1.5874,-4.9854,-1.9297;.6842,-4.238,-1.4607;2.0548,-4.2802,-3.112;-1.9701,-5.6368,-3.9479;-2.6157,-5.1626,-1.6046;-.9083,-4.0561,.2715;-2.0806,-3.8994,.8748;-2.9301,-4.4108,.4194;-2.1236,-3.7369,2.3372;-2.2602,-3.5027,5.1271;-3.3065,-4.054,3.0206;-1.0118,-3.2987,3.0727;-1.0768,-3.1836,4.458;-3.3726,-3.9409,4.4067;-4.1791,-4.3994,2.459;-.067,-3.0546,2.581;-.188,-2.8603,5.0071;-4.2977,-4.2014,4.9282;-2.3102,-3.4205,6.2164;1.5312,-3.7829,-.5295;2.2502,-3.1981,-.9619;.4292,.5459,-4.5484;-3.0478,-2.026,-.048;-3.0177,-1.2886,1.1332;-2.0228,-.5907,1.5705;-.6808,.4862,1.3087;-.8906,1.405,-.2971;.8352,-.5735,1.4719;-.8402,1.632,2.7825;-4.0614,-1.3593,1.948;-3.9873,-.7321,3.2181;-.4881,.8059,-1.1321;-.3074,2.3432,-.2428;-1.9459,1.6724,-.484;.9308,-.9033,2.52;1.738,.002,1.201;.8067,-1.4455,.7987;-.8399,1.0625,3.7288;.0126,2.3344,2.8128;-1.7664,2.2321,2.7366;-3.1335,-1.113,3.8006;-4.9283,-.9841,3.7251;-3.9012,.3614,3.1071;4.8403,-.5485,.9818;4.4783,-1.8993,.9149;3.7963,-2.5025,1.965;3.495,-1.7406,3.0895;3.9037,-.4159,3.2157;4.583,.1734,2.1545;4.663,-2.4564,-.0041;3.4518,-3.5347,1.8929;2.6161,-2.3139,4.1137;3.6487,.1485,4.1133;4.875,1.2254,2.2143;-.8325,1.0147,-4.1514;-1.9473,.1876,-4.1775;-1.7927,-1.1249,-4.6114;-.5648,-1.6119,-5.047;.5415,-.7715,-5.0159;-.9304,2.0318,-3.763;-2.9243,.5366,-3.8416;-2.9505,-2.0248,-4.5748;-.4841,-2.6465,-5.3813;1.5134,-1.1551,-5.3287;2.1936,-1.5721,4.9796;2.3205,-3.487,4.0205;-2.846,-3.108,-5.1048;-3.9494,-1.6356,-4.0039;7.1742,1.008,-1.6219;6.2294,1.4352,-2.6003;8.5627,1.1886,-1.8681;9.0055,1.7431,-3.0438;9.2766,.8642,-1.1046;10.0765,1.8707,-3.2246;6.7221,1.9842,-3.8172;8.0711,2.1336,-4.0327;6.0115,2.2791,-4.5925;8.4258,2.5509,-4.9794;3.6631,3.2212,-3.5307;2.5762,3.6791,-4.3321;4.5812,4.1903,-3.0358;4.4624,5.5182,-3.3707;5.3901,3.8735,-2.3757;5.1827,6.241,-2.977;2.4886,5.0569,-4.6744;3.4148,5.9593,-4.2137;1.6572,5.3876,-5.3046;3.3365,7.017,-4.4806;-4.3773,-2.5875,-.4957;-4.2278,-3.3561,-1.2723;-4.9518,-3.0249,.3373;-5.0045,-1.8017,-.9564;-2.0605,-1.6714,-1.1278;-2.2966,-.6875,-1.5704;-1.0105,-1.6302,-.7985;-2.1026,-2.4045,-1.9446;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648171513654</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004789543608 0.000354239552 0.047028992933 0.005336970704</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021461020 -0.000916967 0.000106968 0.000139289 0.000190665 0.000216816 0.000285064 0.000329768 0.000504609 0.000544942 0.000665767 0.000738822 0.000759240 0.000783860 0.000837698 0.000940845 0.001017460 0.001088425 0.001121597 0.001195024 0.001258568 0.001340352 0.001438594 0.001588820 0.001653558 0.001960646 0.002065517 0.002155508 0.002209083 0.002373828 0.002638034 0.002991385 0.003285951 0.003745257 0.003834049 0.004021120 0.004380099 0.005045288 0.005355682 0.005431524 0.005826756 0.006096584 0.006463946 0.007153369 0.007572200 0.007768547 0.008148690 0.008813640 0.009316812 0.009719377 0.009931111 0.011065581 0.011610011 0.012749693 0.012951726 0.013333223 0.013712535 0.014702020 0.014883948 0.015209533 0.015466509 0.016020914 0.016563941 0.016827943 0.017298846 0.017721685 0.018621530 0.019224050 0.020687071 0.020803560 0.021505569 0.022663909 0.022858827 0.024006743 0.025852607 0.026333318 0.026771500 0.028272928 0.028780582 0.030577000 0.031148309 0.031412243 0.032038034 0.033348288 0.033746535 0.036807551 0.037292355 0.038894721 0.039185546 0.040749826 0.041400036 0.043663163 0.045092300 0.048234739 0.049062167 0.049440922 0.049983304 0.050953783 0.050995450 0.052107910 0.052332588 0.052392448 0.052537313 0.053393014 0.054034873 0.054636630 0.055079725 0.055822954 0.056362989 0.056457144 0.057034432 0.057682951 0.058408114 0.059528203 0.060598182 0.060828566 0.061210228 0.061770747 0.062258481 0.064890921 0.065630298 0.065742404 0.066268924 0.071256616 0.073718230 0.074354820 0.076775705 0.078640218 0.083517187 0.084184203 0.085022801 0.086196262 0.086861308 0.089581835 0.090471536 0.091962241 0.094412733 0.094648072 0.095554197 0.095826775 0.096115093 0.097373888 0.098209109 0.098890305 0.099334243 0.099916385 0.100521091 0.101439238 0.102208441 0.102985086 0.103727430 0.104374657 0.105981633 0.106085200 0.106638998 0.108421692 0.109593572 0.110479042 0.112248284 0.113029832 0.116264436 0.118120115 0.118464835 0.120950026 0.122707973 0.123395886 0.125517732 0.126286323 0.130397156 0.131556075 0.134757819 0.141537039 0.142301838 0.144793265 0.145756073 0.146390836 0.146720511 0.147054820 0.152422634 0.155228219 0.159440889 0.170465736 0.172538089 0.174916475 0.181773437 0.182640755 0.185923734 0.186594298 0.190606542 0.192520996 0.195966928 0.197603852 0.200045798 0.204695437 0.205584049 0.206729801 0.209179600 0.209612556 0.211967826 0.214674038 0.217577080 0.223856343 0.224654255 0.228945392 0.233420942 0.234046289 0.234796760 0.242995051 0.252860006 0.256486193 0.256648299 0.262662404 0.278092927 0.282222597 0.285972767 0.286967197 0.291191591 0.298429903 0.301987610 0.302923363 0.305128963 0.311853781 0.314462471 0.320530095 0.321412169 0.327237662 0.342787461 0.344906403 0.348181648 0.348927316 0.350195429 0.354272323 0.360741949 0.361451845 0.369754297 0.380607940 0.404284259 0.421657392 0.424457685 0.450429870 0.463104675 0.468595118 0.473180084 0.474061161 0.475626970 0.480122402 0.485683640 0.504098677 0.530020588 0.559467210 0.564365432 0.568986632 0.589943810 0.592092188 0.602334868 0.635343216 0.639045988 0.641993842 0.662128185 0.668442602 0.680356356 0.683649628 0.691224007 0.694103149 0.703808440 0.704709559 0.711855811 0.737852192 0.749891387 0.759262604 0.771829885 0.776573553 0.804064474 0.808658583 0.810853835 0.813145203 0.819382509 0.820436402 0.828655043 0.829525815 0.831171622 0.839409017 0.844138789 0.844897310 0.849376234 0.856929550 0.861392053 0.864552814 0.869776259 0.871161566 0.883136808 0.887374390 0.890901323 0.892386902 0.915808352 0.921886885 0.930255645 0.932038332 0.963531646 0.975090111 0.976624332 0.991199187 0.999287942 1.022697421 1.034247572 1.043466642 1.050965080 1.057925754 1.083756036 1.085395224 1.088420569 1.104694532 1.106578481 1.112035934 1.122551769 1.123465067 1.134952159 1.138926061 1.167327068 1.170530582 1.178726809 1.185412099 1.194048201 1.202717786 1.219785879 1.239894129 1.259417178 1.295256539 1.312904823 1.323336104 1.325229360 1.326417678 1.332774256 1.334190114 1.340341426 1.341692081 1.355388649 1.374673673 1.378441214 1.380932527 1.380999492 1.417946850 1.550963703 1.659884710 1.677361091</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">14</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38186184" y3="0.13714288" z3="-0.22621721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44708938" y3="0.07506055" z3="0.3246081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71529791" y3="0.38824724" z3="-0.4262342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82680792" y3="1.26789353" z3="-2.34373275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44481535" y3="0.56607912" z3="-1.21179012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75899221" y3="0.97180159" z3="-3.66825933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.75976767" y3="1.81976783" z3="-3.22789615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.55477769" y3="2.7661357" z3="-4.71413653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60263911" y3="1.43680194" z3="-4.36433907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.69423381" y3="3.14738133" z3="-5.27261134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.85657252" y3="-0.35585506" z3="-3.3866964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13011452" y3="0.29210192" z3="-0.98590709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38507091" y3="-0.88859214" z3="-1.89755424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92167799" y3="-0.74701132" z3="-1.68057186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0987201" y3="-2.20465563" z3="-1.7155489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.05634924" y3="-3.74597362" z3="0.73640087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.35131045" y3="-5.18036154" z3="-4.71594244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.07166001" y3="-4.98529107" z3="-3.67663132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.6478442" y3="-4.45634252" z3="-1.05164416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.02809841" y3="-4.49147364" z3="-2.79142709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.23329692" y3="-5.24162582" z3="-3.25094858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.59316293" y3="-4.97854859" z3="-1.9310474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.68039063" y3="-4.23678593" z3="-1.46229945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.05020866" y3="-4.28068533" z3="-3.11418532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.97805016" y3="-5.62770445" z3="-3.94966047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.62162063" y3="-5.15397188" z3="-1.60556739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.91087646" y3="-4.05313893" z3="0.27088621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.08222789" y3="-3.89652194" z3="0.87558051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.93293049" y3="-4.40588837" z3="0.41993837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12431107" y3="-3.73444095" z3="2.33780669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25940005" y3="-3.50148767" z3="5.12784976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30730797" y3="-4.05043892" z3="3.02162248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01160964" y3="-3.29796559" z3="3.07307307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07593511" y3="-3.18350098" z3="4.45838195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37264255" y3="-3.93794863" z3="4.40771405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.1805371" y3="-4.39450035" z3="2.46024047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06674683" y3="-3.05476039" z3="2.58099424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.18649943" y3="-2.86143514" z3="5.00733976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29778502" y3="-4.19761185" z3="4.92956362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.3088302" y3="-3.41975491" z3="6.21727106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.5287872" y3="-3.78450306" z3="-0.53113616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.24875711" y3="-3.20055356" z3="-0.96327782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.43094856" y3="0.54010196" z3="-4.55084912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04947484" y3="-2.01986638" z3="-0.04565091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01693954" y3="-1.28371472" z3="1.13600355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.0208836" y3="-0.58666538" z3="1.57247898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.67711101" y3="0.48748245" z3="1.30940786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.88524255" y3="1.40658682" z3="-0.29656875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.83706129" y3="-0.57503241" z3="1.47150964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.83329133" y3="1.63389715" z3="2.78297639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05964605" y3="-1.3539018" z3="1.95231186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.98332856" y3="-0.72733061" z3="3.22257961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.48403529" y3="0.80653344" z3="-1.13138677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.30011035" y3="2.34355053" z3="-0.24241031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.94004055" y3="1.67606777" z3="-0.48346703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.93239736" y3="-0.90575312" z3="2.51929502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.740779" y3="-0.0010446" z3="1.20049508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80665864" y3="-1.44650813" z3="0.79771954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.83325533" y3="1.06471887" z3="3.72948125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.02067463" y3="2.33498157" z3="2.81252082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.75859368" y3="2.23546517" z3="2.73764048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.12932791" y3="-1.10944955" z3="3.80402144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.92407612" y3="-0.97841254" z3="3.73055651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.89601901" y3="0.36609233" z3="3.11198681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84059134" y3="-0.54989301" z3="0.98245789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47785409" y3="-1.90045046" z3="0.9149421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79622925" y3="-2.50402064" z3="1.96505905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49592218" y3="-1.74265236" z3="3.09021045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.90529529" y3="-0.41828961" z3="3.21703316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58430936" y3="0.17142035" z3="2.15584664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.66169543" y3="-2.4570941" z3="-0.00454978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45121772" y3="-3.53606175" z3="1.89260296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61719217" y3="-2.31618093" z3="4.11443725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.6509986" y3="0.14572005" z3="4.1150802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.87678011" y3="1.2231998" z3="2.21611835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8323348" y3="1.00297794" z3="-4.15218997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.9442665" y3="0.17215063" z3="-4.18132887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.78520052" y3="-1.13747617" z3="-4.62102695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.55582696" y3="-1.6182374" z3="-5.05978777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.54783257" y3="-0.77474681" z3="-5.02416258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.93358176" y3="2.01815503" z3="-3.75995511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.9226327" y3="0.51633593" z3="-3.84429066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.93954094" y3="-2.04193201" z3="-4.59065096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.47169178" y3="-2.65047637" z3="-5.40031446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.52102266" y3="-1.15377662" z3="-5.33837649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19555009" y3="-1.57465553" z3="4.98105759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32075906" y3="-3.48901976" z3="4.0205202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.83629595" y3="-3.11398201" z3="-5.15186436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.93440403" y3="-1.66822689" z3="-3.99779217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17324909" y3="1.0097587" z3="-1.62031458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.2281622" y3="1.43648732" z3="-2.59864595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56165061" y3="1.19184611" z3="-1.86622514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.00403781" y3="1.74736554" z3="-3.04164822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27574525" y3="0.8677718" z3="-1.10282841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.07489052" y3="1.87609267" z3="-3.22222227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.72051559" y3="1.98662206" z3="-3.81513243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.06936164" y3="2.13743808" z3="-4.03043506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00966983" y3="2.28127492" z3="-4.59040375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.42375179" y3="2.55557313" z3="-4.9768548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.65957194" y3="3.22037026" z3="-3.52797955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.57168703" y3="3.6775304" z3="-4.32856382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.57663126" y3="4.19021444" z3="-3.03270238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.45609866" y3="5.51814753" z3="-3.36643616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.38625122" y3="3.8738319" z3="-2.37322382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.17570183" y3="6.24154948" z3="-2.97257736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.48227877" y3="5.05547731" z3="-4.66962937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.40753709" y3="5.95867977" z3="-4.20864269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.65021609" y3="5.3856708" z3="-5.29926848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.32786957" y3="7.01638974" z3="-4.47472517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.37979068" y3="-2.58043115" z3="-0.49197992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.23168963" y3="-3.3474462" z3="-1.27038103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9533176" y3="-3.01847166" z3="0.34125758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.00718957" y3="-1.79379816" z3="-0.95057383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.06272506" y3="-1.66613162" z3="-1.12616445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29722842" y3="-0.68110474" z3="-1.56680118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.01208272" y3="-1.62829488" z3="-0.79839169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.108496" y3="-2.39741698" z3="-1.94428134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3819,.1371,-.2262;7.4471,.0751,.3246;6.7153,.3882,-.4262;4.8268,1.2679,-2.3437;4.4448,.5661,-1.2118;2.759,.9718,-3.6683;3.7598,1.8198,-3.2279;1.5548,2.7661,-4.7141;1.6026,1.4368,-4.3643;.6942,3.1474,-5.2726;2.8566,-.3559,-3.3867;3.1301,.2921,-.9859;2.3851,-.8886,-1.8976;.9217,-.747,-1.6806;3.0987,-2.2047,-1.7155;-.0563,-3.746,.7364;.3513,-5.1804,-4.7159;.0717,-4.9853,-3.6766;-.6478,-4.4563,-1.0516;1.0281,-4.4915,-2.7914;-1.2333,-5.2416,-3.2509;-1.5932,-4.9785,-1.931;.6804,-4.2368,-1.4623;2.0502,-4.2807,-3.1142;-1.9781,-5.6277,-3.9497;-2.6216,-5.154,-1.6056;-.9109,-4.0531,.2709;-2.0822,-3.8965,.8756;-2.9329,-4.4059,.4199;-2.1243,-3.7344,2.3378;-2.2594,-3.5015,5.1278;-3.3073,-4.0504,3.0216;-1.0116,-3.298,3.0731;-1.0759,-3.1835,4.4584;-3.3726,-3.9379,4.4077;-4.1805,-4.3945,2.4602;-.0667,-3.0548,2.581;-.1865,-2.8614,5.0073;-4.2978,-4.1976,4.9296;-2.3088,-3.4198,6.2173;1.5288,-3.7845,-.5311;2.2488,-3.2006,-.9633;.4309,.5401,-4.5508;-3.0495,-2.0199,-.0457;-3.0169,-1.2837,1.136;-2.0209,-.5867,1.5725;-.6771,.4875,1.3094;-.8852,1.4066,-.2966;.8371,-.575,1.4715;-.8333,1.6339,2.783;-4.0596,-1.3539,1.9523;-3.9833,-.7273,3.2226;-.484,.8065,-1.1314;-.3001,2.3436,-.2424;-1.94,1.6761,-.4835;.9324,-.9058,2.5193;1.7408,-.001,1.2005;.8067,-1.4465,.7977;-.8333,1.0647,3.7295;.0207,2.335,2.8125;-1.7586,2.2355,2.7376;-3.1293,-1.1094,3.804;-4.9241,-.9784,3.7306;-3.896,.3661,3.112;4.8406,-.5499,.9825;4.4779,-1.9005,.9149;3.7962,-2.504,1.9651;3.4959,-1.7427,3.0902;3.9053,-.4183,3.217;4.5843,.1714,2.1558;4.6617,-2.4571,-.0045;3.4512,-3.5361,1.8926;2.6172,-2.3162,4.1144;3.651,.1457,4.1151;4.8768,1.2232,2.2161;-.8323,1.003,-4.1522;-1.9443,.1722,-4.1813;-1.7852,-1.1375,-4.621;-.5558,-1.6182,-5.0598;.5478,-.7747,-5.0242;-.9336,2.0182,-3.76;-2.9226,.5163,-3.8443;-2.9395,-2.0419,-4.5907;-.4717,-2.6505,-5.4003;1.521,-1.1538,-5.3384;2.1956,-1.5747,4.9811;2.3208,-3.489,4.0205;-2.8363,-3.114,-5.1519;-3.9344,-1.6682,-3.9978;7.1732,1.0098,-1.6203;6.2282,1.4365,-2.5986;8.5617,1.1918,-1.8662;9.004,1.7474,-3.0416;9.2757,.8678,-1.1028;10.0749,1.8761,-3.2222;6.7205,1.9866,-3.8151;8.0694,2.1374,-4.0304;6.0097,2.2813,-4.5904;8.4238,2.5556,-4.9769;3.6596,3.2204,-3.528;2.5717,3.6775,-4.3286;4.5766,4.1902,-3.0327;4.4561,5.5181,-3.3664;5.3863,3.8738,-2.3732;5.1757,6.2415,-2.9726;2.4823,5.0555,-4.6696;3.4075,5.9587,-4.2086;1.6502,5.3857,-5.2993;3.3279,7.0164,-4.4747;-4.3798,-2.5804,-.492;-4.2317,-3.3474,-1.2704;-4.9533,-3.0185,.3413;-5.0072,-1.7938,-.9506;-2.0627,-1.6661,-1.1262;-2.2972,-.6811,-1.5668;-1.0121,-1.6283,-.7984;-2.1085,-2.3974,-1.9443;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648194879406</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007517712294 0.000520400507 0.024432307359 0.005337067609</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021464881 -0.001028113 0.000108135 0.000139311 0.000190801 0.000216871 0.000285124 0.000329903 0.000504624 0.000545524 0.000666713 0.000739219 0.000759428 0.000784243 0.000837685 0.000940927 0.001017974 0.001088527 0.001121840 0.001195184 0.001258600 0.001340340 0.001438950 0.001589323 0.001653656 0.001960608 0.002065698 0.002155377 0.002209215 0.002373883 0.002638077 0.002991650 0.003285974 0.003745983 0.003834042 0.004021137 0.004380238 0.005045238 0.005357542 0.005432088 0.005829311 0.006096715 0.006463945 0.007157499 0.007576660 0.007773089 0.008157695 0.008815980 0.009328136 0.009849455 0.010502449 0.011093295 0.011616939 0.012749998 0.012960381 0.013344986 0.013712711 0.014725376 0.014884948 0.015212529 0.015470489 0.016020943 0.016565882 0.016839293 0.017299943 0.017722686 0.018623606 0.019224105 0.020689479 0.020805395 0.021527771 0.022692449 0.022894779 0.024007355 0.025852643 0.026333479 0.026771545 0.028272925 0.028780740 0.030579370 0.031155278 0.031413436 0.032039099 0.033348285 0.033746532 0.036808033 0.037292442 0.038894935 0.039185525 0.040749868 0.041401258 0.043663174 0.045092308 0.048234912 0.049062182 0.049440952 0.049983307 0.050954136 0.050995754 0.052107914 0.052332587 0.052392447 0.052537330 0.053392987 0.054034924 0.054636622 0.055079736 0.055823190 0.056362986 0.056457141 0.057034593 0.057685873 0.058409885 0.059528197 0.060598300 0.060828679 0.061210905 0.061770814 0.062258482 0.064890921 0.065630282 0.065742792 0.066269531 0.071258316 0.073718489 0.074355716 0.076776050 0.078646167 0.083517880 0.084187948 0.085022939 0.086196343 0.086862146 0.089582212 0.090471938 0.091964789 0.094413558 0.094649353 0.095554199 0.095826932 0.096115225 0.097373888 0.098209114 0.098890525 0.099334247 0.099916385 0.100521242 0.101439261 0.102208504 0.102985600 0.103727476 0.104374662 0.105982725 0.106088086 0.106639324 0.108423221 0.109593884 0.110479012 0.112248313 0.113030028 0.116269004 0.118120454 0.118465346 0.120950043 0.122736032 0.123395918 0.125523368 0.126296756 0.130397235 0.131556026 0.134757831 0.141537006 0.142301806 0.144793498 0.145756010 0.146390699 0.146719755 0.147054570 0.152422525 0.155227922 0.159440895 0.170468974 0.172538097 0.174917799 0.181774709 0.182640801 0.185923733 0.186594272 0.190606633 0.192520905 0.195967807 0.197603833 0.200045784 0.204695434 0.205584198 0.206729852 0.209181659 0.209612561 0.211968068 0.214673928 0.217577681 0.223856369 0.224654387 0.228946276 0.233421163 0.234046577 0.234796745 0.242995052 0.252860423 0.256486198 0.256648271 0.262664976 0.278093048 0.282222597 0.285972768 0.286970261 0.291191652 0.298435882 0.301992998 0.302923643 0.305128986 0.311857561 0.314462558 0.320531190 0.321412192 0.327247772 0.342788684 0.344960238 0.348189130 0.348927516 0.350197018 0.354272328 0.360741958 0.361452796 0.369754383 0.380662426 0.404317358 0.421659756 0.424457942 0.450429874 0.463160926 0.468595214 0.473209471 0.474119482 0.475628238 0.480209631 0.485683629 0.504185752 0.530103237 0.559634129 0.564408062 0.569149868 0.589943834 0.592092249 0.602338633 0.635343217 0.639046036 0.642015196 0.662128232 0.668475433 0.680356382 0.683649726 0.691224011 0.694103132 0.703808487 0.704711983 0.711877595 0.737858006 0.749891471 0.759262611 0.771829981 0.776573840 0.804064476 0.808658585 0.810853852 0.813145203 0.819390653 0.820436455 0.828655055 0.829541897 0.831171760 0.839409061 0.844138788 0.844897389 0.849376251 0.856929559 0.861392036 0.864553550 0.869779601 0.871168902 0.883136937 0.887374390 0.890901324 0.892393670 0.915808640 0.921887036 0.930255644 0.932038763 0.963531751 0.975090453 0.976626640 0.991199216 0.999287941 1.022697445 1.034247617 1.043466747 1.050965076 1.057925750 1.083756033 1.085395218 1.088420577 1.104694554 1.106578481 1.112035942 1.122551784 1.123465069 1.134952169 1.138926090 1.167327093 1.170531144 1.178726818 1.185414326 1.194048205 1.202717815 1.219793142 1.239905303 1.261769103 1.295260918 1.312911391 1.323337817 1.325229870 1.326418541 1.332791962 1.334542454 1.340341524 1.341692089 1.355389685 1.374673672 1.378471769 1.380932548 1.381007932 1.417948210 1.550963749 1.659884816 1.677651243</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">15</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38148705" y3="0.13640459" z3="-0.22537802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44665929" y3="0.07653594" z3="0.3259049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71468118" y3="0.38917727" z3="-0.4249835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.8256168" y3="1.26765235" z3="-2.34235995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44413843" y3="0.56462789" z3="-1.21098926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7588424" y3="0.96969735" z3="-3.66779054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.75811046" y3="1.81880789" z3="-3.22637559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.55149146" y3="2.76309927" z3="-4.71171769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60208286" y3="1.43336942" z3="-4.36395763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.69028844" y3="3.14341125" z3="-5.26983054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.858128" y3="-0.35798005" z3="-3.38682247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1297174" y3="0.28908528" z3="-0.98553714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38523829" y3="-0.89123419" z3="-1.89831175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92170393" y3="-0.74921922" z3="-1.68235654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09840486" y3="-2.20750038" z3="-1.71615391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.05873109" y3="-3.74406877" z3="0.73499038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.34339373" y3="-5.17549628" z3="-4.71848841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.0646436" y3="-4.98045334" z3="-3.67893301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.65265603" y3="-4.45175294" z3="-1.05327237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.02261986" y3="-4.48974662" z3="-2.79366038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.24080331" y3="-5.23379868" z3="-3.25302329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.59961244" y3="-4.97071531" z3="-1.93283225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.67600253" y3="-4.2353014" z3="-1.46423494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.04515112" y3="-4.28125602" z3="-3.11659949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.98675745" y3="-5.61736751" z3="-3.95183224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.62842203" y3="-5.14377733" z3="-1.60718514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.91409254" y3="-4.04928927" z3="0.26975982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.08500099" y3="-3.89147873" z3="0.87534404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.93621279" y3="-4.40043096" z3="0.42036644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12552017" y3="-3.73139645" z3="2.33802496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25826523" y3="-3.50095944" z3="5.12846856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3083479" y3="-4.04663725" z3="3.02244769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0116882" y3="-3.29722722" z3="3.0729565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07486164" y3="-3.18395971" z3="4.45844353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37255513" y3="-3.93536655" z3="4.40870334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.18243117" y3="-4.3890407" z3="2.46135242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0668107" y3="-3.0549297" z3="2.58046444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.18463296" y3="-2.86354633" z3="5.00710494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29766022" y3="-4.19433264" z3="4.93096242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.30683012" y3="-3.42008106" z3="6.2179946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.52594585" y3="-3.78608639" z3="-0.53290279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.24690632" y3="-3.20324403" z3="-0.96465978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.43342124" y3="0.5335115" z3="-4.55375449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05045767" y3="-2.01448983" z3="-0.04213139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01598706" y3="-1.2783115" z3="1.13966954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.01909866" y3="-0.58190615" z3="1.57476217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.67274504" y3="0.48906427" z3="1.3104852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.87941045" y3="1.40857905" z3="-0.29542838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.83907416" y3="-0.57686022" z3="1.47117442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.82566906" y3="1.6357704" z3="2.78410517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05769712" y3="-1.34792034" z3="1.95706272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.97912812" y3="-0.72246122" z3="3.22779246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.47949096" y3="0.80759489" z3="-1.13022701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.29222704" y3="2.34426506" z3="-0.2413006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.93362701" y3="1.6803813" z3="-0.48223296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.93421865" y3="-0.90868814" z3="2.51861308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.74377418" y3="-0.00437405" z3="1.20022828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80661965" y3="-1.44762302" z3="0.79654272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.82584478" y3="1.06668956" z3="3.73066389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.02951584" y3="2.33539724" z3="2.81284277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.74999167" y3="2.23890464" z3="2.7394414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.12484138" y3="-1.10617375" z3="3.80777997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.91953352" y3="-0.97289124" z3="3.73668433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.89061377" y3="0.37092711" z3="3.11793127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84077462" y3="-0.5513474" z3="0.9831212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47733045" y3="-1.90168064" z3="0.91485579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79618681" y3="-2.50569025" z3="1.96502622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49699755" y3="-1.74498715" z3="3.09093449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.90707422" y3="-0.42091071" z3="3.21844318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58569139" y3="0.16922864" z3="2.15723295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.66016158" y3="-2.45772455" z3="-0.00521126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45063928" y3="-3.53752038" z3="1.89207269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61851183" y3="-2.31877116" z3="4.11522885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.65361689" y3="0.14258539" z3="4.11705407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.87872217" y3="1.22082322" z3="2.21806906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83156182" y3="0.98979608" z3="-4.15300336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.94032113" y3="0.15479003" z3="-4.18671702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.77629073" y3="-1.15201121" z3="-4.63375492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.54499017" y3="-1.62599735" z3="-5.07389764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.5555561" y3="-0.77860993" z3="-5.03314617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.93658076" y3="2.00286152" z3="-3.75623885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.92006365" y3="0.49362207" z3="-3.84818991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.9280925" y3="-2.0600299" z3="-4.61035427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.45714037" y3="-2.65593731" z3="-5.42000041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.53028847" y3="-1.15232322" z3="-5.34899878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19737413" y3="-1.57753777" z3="4.9823176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32172123" y3="-3.4914564" z3="4.02088016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.82206674" y3="-3.12726151" z3="-5.1706338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.9241439" y3="-1.69265919" z3="-4.02145086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17219185" y3="1.01171866" z3="-1.61869197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.22680097" y3="1.43798884" z3="-2.5969236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.56043656" y3="1.19534396" z3="-1.86434575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.00239047" y3="1.75194235" z3="-3.03942531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27477535" y3="0.87155965" z3="-1.10105481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.07313554" y3="1.88180493" z3="-3.21982982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.7187141" y3="1.98938314" z3="-3.81301989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.06743424" y3="2.14167154" z3="-4.02808752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00764035" y3="2.2837695" z3="-4.58818993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.42151735" y3="2.56070224" z3="-4.97422901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.65573161" y3="3.21951193" z3="-3.5252078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.56684036" y3="3.67581211" z3="-4.3249481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.57161913" y3="4.19019584" z3="-3.02941178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.44907494" y3="5.51827262" z3="-3.36186886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.38201103" y3="3.87431837" z3="-2.37063825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.16791575" y3="6.24230822" z3="-2.96777287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.4752396" y3="5.05399971" z3="-4.66450472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.39944146" y3="5.95809687" z3="-4.20310277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.64244208" y3="5.38362809" z3="-5.29347177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.31815799" y3="7.01595092" z3="-4.46817763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.38236053" y3="-2.57292292" z3="-0.48677184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.23660526" y3="-3.33860745" z3="-1.26684525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95421367" y3="-3.01258337" z3="0.34675355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0107139" y3="-1.78489108" z3="-0.94178283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.06525013" y3="-1.66026816" z3="-1.12400957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29793185" y3="-0.67343472" z3="-1.56170192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.01376468" y3="-1.62628365" z3="-0.79833883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.11502451" y3="-2.38915212" z3="-1.94388433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3815,.1364,-.2254;7.4467,.0765,.3259;6.7147,.3892,-.425;4.8256,1.2677,-2.3424;4.4441,.5646,-1.211;2.7588,.9697,-3.6678;3.7581,1.8188,-3.2264;1.5515,2.7631,-4.7117;1.6021,1.4334,-4.364;.6903,3.1434,-5.2698;2.8581,-.358,-3.3868;3.1297,.2891,-.9855;2.3852,-.8912,-1.8983;.9217,-.7492,-1.6824;3.0984,-2.2075,-1.7162;-.0587,-3.7441,.735;.3434,-5.1755,-4.7185;.0646,-4.9805,-3.6789;-.6527,-4.4518,-1.0533;1.0226,-4.4897,-2.7937;-1.2408,-5.2338,-3.253;-1.5996,-4.9707,-1.9328;.676,-4.2353,-1.4642;2.0452,-4.2813,-3.1166;-1.9868,-5.6174,-3.9518;-2.6284,-5.1438,-1.6072;-.9141,-4.0493,.2698;-2.085,-3.8915,.8753;-2.9362,-4.4004,.4204;-2.1255,-3.7314,2.338;-2.2583,-3.501,5.1285;-3.3083,-4.0466,3.0224;-1.0117,-3.2972,3.073;-1.0749,-3.184,4.4584;-3.3726,-3.9354,4.4087;-4.1824,-4.389,2.4614;-.0668,-3.0549,2.5805;-.1846,-2.8635,5.0071;-4.2977,-4.1943,4.931;-2.3068,-3.4201,6.218;1.5259,-3.7861,-.5329;2.2469,-3.2032,-.9647;.4334,.5335,-4.5538;-3.0505,-2.0145,-.0421;-3.016,-1.2783,1.1397;-2.0191,-.5819,1.5748;-.6727,.4891,1.3105;-.8794,1.4086,-.2954;.8391,-.5769,1.4712;-.8257,1.6358,2.7841;-4.0577,-1.3479,1.9571;-3.9791,-.7225,3.2278;-.4795,.8076,-1.1302;-.2922,2.3443,-.2413;-1.9336,1.6804,-.4822;.9342,-.9087,2.5186;1.7438,-.0044,1.2002;.8066,-1.4476,.7965;-.8258,1.0667,3.7307;.0295,2.3354,2.8128;-1.75,2.2389,2.7394;-3.1248,-1.1062,3.8078;-4.9195,-.9729,3.7367;-3.8906,.3709,3.1179;4.8408,-.5513,.9831;4.4773,-1.9017,.9149;3.7962,-2.5057,1.965;3.497,-1.745,3.0909;3.9071,-.4209,3.2184;4.5857,.1692,2.1572;4.6602,-2.4577,-.0052;3.4506,-3.5375,1.8921;2.6185,-2.3188,4.1152;3.6536,.1426,4.1171;4.8787,1.2208,2.2181;-.8316,.9898,-4.153;-1.9403,.1548,-4.1867;-1.7763,-1.152,-4.6338;-.545,-1.626,-5.0739;.5556,-.7786,-5.0331;-.9366,2.0029,-3.7562;-2.9201,.4936,-3.8482;-2.9281,-2.06,-4.6104;-.4571,-2.6559,-5.42;1.5303,-1.1523,-5.349;2.1974,-1.5775,4.9823;2.3217,-3.4915,4.0209;-2.8221,-3.1273,-5.1706;-3.9241,-1.6927,-4.0215;7.1722,1.0117,-1.6187;6.2268,1.438,-2.5969;8.5604,1.1953,-1.8643;9.0024,1.7519,-3.0394;9.2748,.8716,-1.1011;10.0731,1.8818,-3.2198;6.7187,1.9894,-3.813;8.0674,2.1417,-4.0281;6.0076,2.2838,-4.5882;8.4215,2.5607,-4.9742;3.6557,3.2195,-3.5252;2.5668,3.6758,-4.3249;4.5716,4.1902,-3.0294;4.4491,5.5183,-3.3619;5.382,3.8743,-2.3706;5.1679,6.2423,-2.9678;2.4752,5.054,-4.6645;3.3994,5.9581,-4.2031;1.6424,5.3836,-5.2935;3.3182,7.016,-4.4682;-4.3824,-2.5729,-.4868;-4.2366,-3.3386,-1.2668;-4.9542,-3.0126,.3468;-5.0107,-1.7849,-.9418;-2.0653,-1.6603,-1.124;-2.2979,-.6734,-1.5617;-1.0138,-1.6263,-.7983;-2.115,-2.3892,-1.9439;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648226412126</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006732586984 0.000472760494 0.047441695630 0.005338374321</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021470873 -0.001314495 0.000108197 0.000139318 0.000191275 0.000218066 0.000285180 0.000330267 0.000505092 0.000546068 0.000668037 0.000739559 0.000759634 0.000784247 0.000837681 0.000940927 0.001018178 0.001088640 0.001123154 0.001197598 0.001258792 0.001340777 0.001439097 0.001597167 0.001655472 0.001961603 0.002066291 0.002155749 0.002209216 0.002373975 0.002639066 0.002991631 0.003285981 0.003745987 0.003834387 0.004021227 0.004380232 0.005045349 0.005359101 0.005432258 0.005832719 0.006096877 0.006465208 0.007161120 0.007579968 0.007776267 0.008162581 0.008816389 0.009331297 0.009859962 0.010973189 0.011421056 0.011670318 0.012749994 0.012978243 0.013365134 0.013713215 0.014763544 0.014887248 0.015221252 0.015480516 0.016020928 0.016567298 0.016863347 0.017300781 0.017723593 0.018626753 0.019224067 0.020691871 0.020807747 0.021552991 0.022718791 0.022970622 0.024007937 0.025852718 0.026334879 0.026771638 0.028272931 0.028780866 0.030581410 0.031161489 0.031415453 0.032039975 0.033348302 0.033746563 0.036808373 0.037292450 0.038895232 0.039185498 0.040749871 0.041402367 0.043663180 0.045092307 0.048235038 0.049062195 0.049440982 0.049983307 0.050954347 0.050995974 0.052107913 0.052332586 0.052392445 0.052537325 0.053392963 0.054034968 0.054636660 0.055079727 0.055823499 0.056362985 0.056457138 0.057034729 0.057688854 0.058411820 0.059528176 0.060598367 0.060828711 0.061211868 0.061771102 0.062258514 0.064890915 0.065630247 0.065743163 0.066269972 0.071259974 0.073718906 0.074356327 0.076776752 0.078651583 0.083518412 0.084191285 0.085023166 0.086196400 0.086862881 0.089582567 0.090472258 0.091966995 0.094414446 0.094650903 0.095554196 0.095827418 0.096115194 0.097373893 0.098209131 0.098890547 0.099334271 0.099916384 0.100521583 0.101439293 0.102208497 0.102985904 0.103727520 0.104374671 0.105983831 0.106090527 0.106639946 0.108424541 0.109594109 0.110478995 0.112248311 0.113030218 0.116275019 0.118120989 0.118465390 0.120950072 0.122776105 0.123395996 0.125531476 0.126313449 0.130397270 0.131556039 0.134757850 0.141537056 0.142301808 0.144794801 0.145756352 0.146390768 0.146719977 0.147054513 0.152422320 0.155228075 0.159440926 0.170471026 0.172538106 0.174919193 0.181776232 0.182640976 0.185923798 0.186594264 0.190606851 0.192520775 0.195968315 0.197603804 0.200045919 0.204695479 0.205584448 0.206729889 0.209183099 0.209612568 0.211968051 0.214673910 0.217578123 0.223856409 0.224654612 0.228946820 0.233421567 0.234046685 0.234796740 0.242995075 0.252861793 0.256486238 0.256648270 0.262667566 0.278093151 0.282222597 0.285972769 0.286973565 0.291192244 0.298442264 0.301998521 0.302923805 0.305129049 0.311861455 0.314462633 0.320533489 0.321412212 0.327258047 0.342789748 0.345015761 0.348194202 0.348927813 0.350199174 0.354272331 0.360741962 0.361454011 0.369754462 0.380723008 0.404353602 0.421662452 0.424457963 0.450429886 0.463223256 0.468595281 0.473243906 0.474183866 0.475629785 0.480299054 0.485683636 0.504280971 0.530194695 0.559810755 0.564454489 0.569340465 0.589943890 0.592092317 0.602342521 0.635343238 0.639046044 0.642038705 0.662128289 0.668510693 0.680356419 0.683649868 0.691224016 0.694103110 0.703808535 0.704714497 0.711900549 0.737864032 0.749891568 0.759262611 0.771830088 0.776574117 0.804064490 0.808658619 0.810854012 0.813145204 0.819399346 0.820436500 0.828655089 0.829559297 0.831171887 0.839409069 0.844138784 0.844897530 0.849376262 0.856929603 0.861392037 0.864554365 0.869783887 0.871175780 0.883136974 0.887374393 0.890901523 0.892401626 0.915808787 0.921887244 0.930255647 0.932039302 0.963531832 0.975090815 0.976629707 0.991199211 0.999287942 1.022697477 1.034247645 1.043466876 1.050965074 1.057925750 1.083756052 1.085395206 1.088420584 1.104694586 1.106578488 1.112035949 1.122551792 1.123465073 1.134952185 1.138926101 1.167327089 1.170531674 1.178726838 1.185416700 1.194048208 1.202717879 1.219800585 1.239914338 1.264337169 1.295266392 1.312919010 1.323339346 1.325230528 1.326419812 1.332806542 1.335003280 1.340341693 1.341692109 1.355390832 1.374673668 1.378504229 1.380932562 1.381017133 1.417949404 1.550963820 1.659884911 1.677946904</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">16</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38119497" y3="0.13584128" z3="-0.22459619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44631061" y3="0.07779401" z3="0.32708113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71418671" y3="0.38997038" z3="-0.42385953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82464464" y3="1.2674355" z3="-2.34118512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44360402" y3="0.56342264" z3="-1.21026979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75863862" y3="0.9679106" z3="-3.66722994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.75671759" y3="1.81796768" z3="-3.22508052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.54865187" y3="2.76048444" z3="-4.70957447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60143502" y3="1.43050163" z3="-4.36333472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.68692656" y3="3.13994219" z3="-5.26746222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.85943061" y3="-0.35980763" z3="-3.38676175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12943104" y3="0.28653291" z3="-0.98513942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38528628" y3="-0.89339417" z3="-1.89878613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92165018" y3="-0.75097376" z3="-1.68381234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09782618" y3="-2.21000143" z3="-1.71640068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.06042677" y3="-3.74254827" z3="0.73381272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.33630235" y3="-5.17074604" z3="-4.72077007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.05833189" y3="-4.97562759" z3="-3.68102863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.65679677" y3="-4.44766936" z3="-1.05467182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.01787586" y3="-4.48849526" z3="-2.79554138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.2478977" y3="-5.22552229" z3="-3.25519144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.60550316" y3="-4.96298915" z3="-1.93455797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.67225066" y3="-4.23413209" z3="-1.46579873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.04091429" y3="-4.28250507" z3="-3.11849432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-1.99520721" y3="-5.60558064" z3="-3.95456659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.63461751" y3="-5.13378051" z3="-1.608707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.91664345" y3="-4.04612954" z3="0.26899472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.08644372" y3="-3.88891186" z3="0.87621991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.93890403" y3="-4.39557413" z3="0.42086254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12615978" y3="-3.72921459" z3="2.33867883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25738954" y3="-3.50047088" z3="5.12920858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30913666" y3="-4.04342137" z3="3.0233668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01149642" y3="-3.29671856" z3="3.07329997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07393559" y3="-3.18429209" z3="4.45886048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37254724" y3="-3.93306628" z3="4.40970722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.18387266" y3="-4.3843319" z3="2.46239176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06662269" y3="-3.05516901" z3="2.58044189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.18313093" y3="-2.86521081" z3="5.0073331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29769431" y3="-4.19133592" z3="4.93223542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.30532516" y3="-3.42034421" z3="6.21881216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.52357138" y3="-3.78776285" z3="-0.53444703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.24532122" y3="-3.2054981" z3="-0.96584629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.43532565" y3="0.52802713" z3="-4.55609873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05255973" y3="-2.00813954" z3="-0.0397792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01566951" y3="-1.27348368" z3="1.14254425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.01762931" y3="-0.57783871" z3="1.57684277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.66960779" y3="0.49037445" z3="1.3116231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.87445386" y3="1.41057418" z3="-0.29419584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84042831" y3="-0.57829857" z3="1.47096426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.81935376" y3="1.63739308" z3="2.78533757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05632653" y3="-1.34285087" z3="1.96157661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.97553967" y3="-0.71826165" z3="3.23249391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.47559426" y3="0.80880369" z3="-1.1289521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.28546655" y3="2.34511524" z3="-0.23995641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.92811935" y3="1.68439702" z3="-0.48111471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.93542108" y3="-0.91125027" z3="2.51805208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.74600882" y3="-0.00716565" z3="1.20012546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80614623" y3="-1.44836188" z3="0.79552737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.81970941" y3="1.06834416" z3="3.73191453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.0368936" y3="2.33573529" z3="2.81337915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.74281862" y3="2.24189261" z3="2.74135514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.12099376" y3="-1.10314802" z3="3.81131095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.91560151" y3="-0.9680318" z3="3.7423835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.88606545" y3="0.37511984" z3="3.1232661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84090871" y3="-0.55244264" z3="0.98377235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4768673" y3="-1.90258767" z3="0.91493059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79609166" y3="-2.5069147" z3="1.96514452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49779048" y3="-1.74672033" z3="3.09163264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.90843664" y3="-0.42287719" z3="3.21965586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58676766" y3="0.16757104" z3="2.15842707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.6588828" y3="-2.45816619" z3="-0.00558259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.45011864" y3="-3.53857755" z3="1.89183381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.61950784" y3="-2.32069293" z3="4.11599404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.65563341" y3="0.14023612" z3="4.1186875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88024278" y3="1.21901708" z3="2.21968607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83119538" y3="0.97829405" z3="-4.15370298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.93709216" y3="0.13945556" z3="-4.19065097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.76861206" y3="-1.16445843" z3="-4.64382087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.5357066" y3="-1.63204327" z3="-5.08676659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.56209872" y3="-0.78152689" z3="-5.04112812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.93959563" y3="1.98941608" z3="-3.75281614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.91806191" y3="0.47338955" z3="-3.85080609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.9164794" y3="-2.07728513" z3="-4.62634893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.44444189" y3="-2.65969184" z3="-5.43883406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.53822116" y3="-1.15057953" z3="-5.35811492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19889129" y3="-1.57970206" z3="4.9835497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3223305" y3="-3.49326737" z3="4.02121731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.8111593" y3="-3.13309452" z3="-5.21807549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.90834163" y3="-1.72625211" z3="-4.01367323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17133921" y3="1.01331188" z3="-1.61728356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.22570083" y3="1.43919529" z3="-2.59544807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55945933" y3="1.19814352" z3="-1.86272991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="9.00107671" y3="1.75555765" z3="-3.03754876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27398936" y3="0.87460355" z3="-1.09951354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.0717361" y3="1.88630506" z3="-3.21781905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.71727921" y3="1.9915568" z3="-3.8112403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.06590008" y3="2.1449913" z3="-4.02612168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00603547" y3="2.28570487" z3="-4.58634955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.4197462" y3="2.5646923" z3="-4.97205387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.65253695" y3="3.21873549" z3="-3.52298215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.56278815" y3="3.67425685" z3="-4.3220266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.56745508" y3="4.19016303" z3="-3.02687013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.44320693" y3="5.51831571" z3="-3.35837196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.3785056" y3="3.87479213" z3="-2.36866353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.16136438" y3="6.24293593" z3="-2.96410159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.46940912" y3="5.05255696" z3="-4.66054898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.39271301" y3="5.95744146" z3="-4.19887792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.63604209" y3="5.38161714" z3="-5.28905184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.31008199" y3="7.01536412" z3="-4.46322883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.38490791" y3="-2.56668597" z3="-0.48253485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.24022541" y3="-3.33372265" z3="-1.26160663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95650993" y3="-3.00434008" z3="0.35237225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.01269623" y3="-1.77895557" z3="-0.93892833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.06772443" y3="-1.65484134" z3="-1.1222109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29770633" y3="-0.66630039" z3="-1.55729329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.01560894" y3="-1.62554128" z3="-0.79804152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.1218928" y3="-2.38121032" z3="-1.94396752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3812,.1358,-.2246;7.4463,.0778,.3271;6.7142,.39,-.4239;4.8246,1.2674,-2.3412;4.4436,.5634,-1.2103;2.7586,.9679,-3.6672;3.7567,1.818,-3.2251;1.5487,2.7605,-4.7096;1.6014,1.4305,-4.3633;.6869,3.1399,-5.2675;2.8594,-.3598,-3.3868;3.1294,.2865,-.9851;2.3853,-.8934,-1.8988;.9217,-.751,-1.6838;3.0978,-2.21,-1.7164;-.0604,-3.7425,.7338;.3363,-5.1707,-4.7208;.0583,-4.9756,-3.681;-.6568,-4.4477,-1.0547;1.0179,-4.4885,-2.7955;-1.2479,-5.2255,-3.2552;-1.6055,-4.963,-1.9346;.6723,-4.2341,-1.4658;2.0409,-4.2825,-3.1185;-1.9952,-5.6056,-3.9546;-2.6346,-5.1338,-1.6087;-.9166,-4.0461,.269;-2.0864,-3.8889,.8762;-2.9389,-4.3956,.4209;-2.1262,-3.7292,2.3387;-2.2574,-3.5005,5.1292;-3.3091,-4.0434,3.0234;-1.0115,-3.2967,3.0733;-1.0739,-3.1843,4.4589;-3.3725,-3.9331,4.4097;-4.1839,-4.3843,2.4624;-.0666,-3.0552,2.5804;-.1831,-2.8652,5.0073;-4.2977,-4.1913,4.9322;-2.3053,-3.4203,6.2188;1.5236,-3.7878,-.5344;2.2453,-3.2055,-.9658;.4353,.528,-4.5561;-3.0526,-2.0081,-.0398;-3.0157,-1.2735,1.1425;-2.0176,-.5778,1.5768;-.6696,.4904,1.3116;-.8745,1.4106,-.2942;.8404,-.5783,1.471;-.8194,1.6374,2.7853;-4.0563,-1.3429,1.9616;-3.9755,-.7183,3.2325;-.4756,.8088,-1.129;-.2855,2.3451,-.24;-1.9281,1.6844,-.4811;.9354,-.9113,2.5181;1.746,-.0072,1.2001;.8061,-1.4484,.7955;-.8197,1.0683,3.7319;.0369,2.3357,2.8134;-1.7428,2.2419,2.7414;-3.121,-1.1031,3.8113;-4.9156,-.968,3.7424;-3.8861,.3751,3.1233;4.8409,-.5524,.9838;4.4769,-1.9026,.9149;3.7961,-2.5069,1.9651;3.4978,-1.7467,3.0916;3.9084,-.4229,3.2197;4.5868,.1676,2.1584;4.6589,-2.4582,-.0056;3.4501,-3.5386,1.8918;2.6195,-2.3207,4.116;3.6556,.1402,4.1187;4.8802,1.219,2.2197;-.8312,.9783,-4.1537;-1.9371,.1395,-4.1907;-1.7686,-1.1645,-4.6438;-.5357,-1.632,-5.0868;.5621,-.7815,-5.0411;-.9396,1.9894,-3.7528;-2.9181,.4734,-3.8508;-2.9165,-2.0773,-4.6263;-.4444,-2.6597,-5.4388;1.5382,-1.1506,-5.3581;2.1989,-1.5797,4.9835;2.3223,-3.4933,4.0212;-2.8112,-3.1331,-5.2181;-3.9083,-1.7263,-4.0137;7.1713,1.0133,-1.6173;6.2257,1.4392,-2.5954;8.5595,1.1981,-1.8627;9.0011,1.7556,-3.0375;9.274,.8746,-1.0995;10.0717,1.8863,-3.2178;6.7173,1.9916,-3.8112;8.0659,2.145,-4.0261;6.006,2.2857,-4.5863;8.4197,2.5647,-4.9721;3.6525,3.2187,-3.523;2.5628,3.6743,-4.322;4.5675,4.1902,-3.0269;4.4432,5.5183,-3.3584;5.3785,3.8748,-2.3687;5.1614,6.2429,-2.9641;2.4694,5.0526,-4.6605;3.3927,5.9574,-4.1989;1.636,5.3816,-5.2891;3.3101,7.0154,-4.4632;-4.3849,-2.5667,-.4825;-4.2402,-3.3337,-1.2616;-4.9565,-3.0043,.3524;-5.0127,-1.779,-.9389;-2.0677,-1.6548,-1.1222;-2.2977,-.6663,-1.5573;-1.0156,-1.6255,-.798;-2.1219,-2.3812,-1.944;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648254521942</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009259155299 0.000643957267 0.024354232222 0.005338779310</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021481746 -0.001567029 0.000109509 0.000139356 0.000191668 0.000219289 0.000285889 0.000330271 0.000505241 0.000546789 0.000670281 0.000739650 0.000759885 0.000784921 0.000837681 0.000941340 0.001018254 0.001088644 0.001123672 0.001202674 0.001258809 0.001340734 0.001439131 0.001600948 0.001656700 0.001961828 0.002069723 0.002158566 0.002209189 0.002373983 0.002639489 0.002991603 0.003285978 0.003746830 0.003835008 0.004021603 0.004380552 0.005045257 0.005358895 0.005432227 0.005832806 0.006097356 0.006469002 0.007164135 0.007583050 0.007776549 0.008168126 0.008816346 0.009333221 0.009864748 0.011020996 0.011587919 0.012360084 0.012750718 0.013028246 0.013423910 0.013716387 0.014834171 0.014901654 0.015243151 0.015507139 0.016020977 0.016570020 0.016911041 0.017303144 0.017725064 0.018633295 0.019224035 0.020695362 0.020811710 0.021592797 0.022739439 0.023138322 0.024009255 0.025852858 0.026337446 0.026771783 0.028272950 0.028781079 0.030584546 0.031169976 0.031418480 0.032041119 0.033348334 0.033746616 0.036808747 0.037292462 0.038895587 0.039185494 0.040749890 0.041403703 0.043663176 0.045092310 0.048235196 0.049062206 0.049441037 0.049983309 0.050954861 0.050996514 0.052107917 0.052332586 0.052392444 0.052537322 0.053392931 0.054035009 0.054636714 0.055079719 0.055823863 0.056362982 0.056457133 0.057035010 0.057694162 0.058414946 0.059528157 0.060598310 0.060828711 0.061212834 0.061771242 0.062258566 0.064890909 0.065630269 0.065743754 0.066270298 0.071261977 0.073719490 0.074356933 0.076777975 0.078657850 0.083519317 0.084195002 0.085023400 0.086196411 0.086864285 0.089582973 0.090472571 0.091969575 0.094415441 0.094652790 0.095554313 0.095827989 0.096115295 0.097373897 0.098209136 0.098890569 0.099334274 0.099916383 0.100522180 0.101439308 0.102208748 0.102985960 0.103727484 0.104374665 0.105985029 0.106092795 0.106640645 0.108424794 0.109594093 0.110478976 0.112248377 0.113030505 0.116284185 0.118121707 0.118465371 0.120950064 0.122838222 0.123395956 0.125543032 0.126340895 0.130397279 0.131556051 0.134757883 0.141537270 0.142301821 0.144795089 0.145756229 0.146390575 0.146719106 0.147054248 0.152422232 0.155227868 0.159440922 0.170473749 0.172538124 0.174920685 0.181777292 0.182641161 0.185923885 0.186594264 0.190607278 0.192520703 0.195969046 0.197603785 0.200045947 0.204695420 0.205584753 0.206729919 0.209183809 0.209612575 0.211968451 0.214674298 0.217578804 0.223856407 0.224654930 0.228947324 0.233422063 0.234046813 0.234796726 0.242995148 0.252863544 0.256486393 0.256648424 0.262670495 0.278093210 0.282222596 0.285972769 0.286977303 0.291193371 0.298449435 0.302004222 0.302924132 0.305129176 0.311865922 0.314462690 0.320537952 0.321412258 0.327270501 0.342790695 0.345089587 0.348197199 0.348928257 0.350202965 0.354272328 0.360741962 0.361455975 0.369754606 0.380817040 0.404407638 0.421666369 0.424458042 0.450429897 0.463316049 0.468595311 0.473282709 0.474287148 0.475632415 0.480424327 0.485683630 0.504420362 0.530326458 0.560042045 0.564520113 0.569633420 0.589944032 0.592092415 0.602348054 0.635343574 0.639046079 0.642071581 0.662128331 0.668561995 0.680356468 0.683649961 0.691224019 0.694103279 0.703808607 0.704716932 0.711933078 0.737872870 0.749891720 0.759262651 0.771830240 0.776574528 0.804064504 0.808658627 0.810854041 0.813145204 0.819412379 0.820436624 0.828655086 0.829584876 0.831171949 0.839409207 0.844138789 0.844897610 0.849376278 0.856929626 0.861392273 0.864555603 0.869791829 0.871182995 0.883136992 0.887374407 0.890901683 0.892412383 0.915808922 0.921887521 0.930255645 0.932039988 0.963531908 0.975091423 0.976632453 0.991199450 0.999287941 1.022697571 1.034247892 1.043466953 1.050965091 1.057925754 1.083756149 1.085395190 1.088420615 1.104694621 1.106578496 1.112035957 1.122551802 1.123465080 1.134952207 1.138926127 1.167327089 1.170532335 1.178726855 1.185419443 1.194048211 1.202718194 1.219809036 1.239927005 1.268052426 1.295274732 1.312930051 1.323340912 1.325231014 1.326420698 1.332820656 1.335766641 1.340341931 1.341692135 1.355392813 1.374673664 1.378538910 1.380932586 1.381027714 1.417951595 1.550963965 1.659885026 1.678236398</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">17</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38076009" y3="0.13523078" z3="-0.22381583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44583568" y3="0.0792784" z3="0.32825828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71351778" y3="0.39093225" z3="-0.42271337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82338181" y3="1.26724996" z3="-2.33991041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44285792" y3="0.56209645" z3="-1.2095247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7583757" y3="0.96580644" z3="-3.66685713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.75496182" y3="1.81702529" z3="-3.22367006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.54530104" y3="2.757418" z3="-4.70737076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60083756" y3="1.42700902" z3="-4.36322066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.68292716" y3="3.13596538" z3="-5.2648944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86075807" y3="-0.36190477" z3="-3.38687898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12896531" y3="0.28371326" z3="-0.98478714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38527709" y3="-0.89588467" z3="-1.89945117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92152473" y3="-0.7528443" z3="-1.68542835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09729778" y3="-2.21268089" z3="-1.71685688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.06294439" y3="-3.74040465" z3="0.732329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.32838767" y3="-5.16521702" z3="-4.72354888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.05129497" y3="-4.97016105" z3="-3.68355919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.66173841" y3="-4.4424684" z3="-1.05649449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.01250498" y3="-4.48686424" z3="-2.79775496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.25560232" y3="-5.21625034" z3="-3.25771763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.61221385" y3="-4.9537618" z3="-1.93680277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.66788144" y3="-4.23265901" z3="-1.46776944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.03613622" y3="-4.28376852" z3="-3.12068721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.00429604" y3="-5.59291526" z3="-3.95737705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.64187983" y3="-5.12142721" z3="-1.61105778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.91999896" y3="-4.04181555" z3="0.26768792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.08955863" y3="-3.88323295" z3="0.8756767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.9422744" y3="-4.39015253" z3="0.42133173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12744033" y3="-3.72608685" z3="2.33880578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25621526" y3="-3.50031867" z3="5.1298641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31013484" y3="-4.03977065" z3="3.024175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01160584" y3="-3.29609208" z3="3.07316096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07284732" y3="-3.18506585" z3="4.45894137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37239586" y3="-3.93083163" z3="4.41070128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.18572059" y3="-4.37904584" z3="2.46352077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06667187" y3="-3.0554524" z3="2.57996504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.18123158" y3="-2.86771977" z3="5.00714112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29748643" y3="-4.18851756" z3="4.93362329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.30328244" y3="-3.42115494" z3="6.21958353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.52085238" y3="-3.78969954" z3="-0.53612182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2434564" y3="-3.20839405" z3="-0.96706264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.43786468" y3="0.52121623" z3="-4.55942043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05339611" y3="-2.00329394" z3="-0.03632449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01503375" y3="-1.26832692" z3="1.14615981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.01635571" y3="-0.57312392" z3="1.57894091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.66553452" y3="0.49193" z3="1.31302941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.86861827" y3="1.41294239" z3="-0.29251142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84204938" y3="-0.58024346" z3="1.47084998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.81218807" y3="1.63882224" z3="2.78708584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05463711" y3="-1.33725399" z3="1.96620029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.97156143" y3="-0.71384181" z3="3.23767697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.47095014" y3="0.8103535" z3="-1.12728531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.27748134" y3="2.34611536" z3="-0.23799363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.92162351" y3="1.68926109" z3="-0.479474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.93682073" y3="-0.9144727" z3="2.51752957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.74859677" y3="-0.01053849" z3="1.20019352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80577403" y3="-1.44945623" z3="0.79441892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.81275281" y3="1.0696667" z3="3.73359383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.04528139" y3="2.33569236" z3="2.81448897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.73465024" y3="2.24492366" z3="2.74390577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.1166197" y3="-1.10028817" z3="3.81489595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.91119239" y3="-0.96310005" z3="3.74857326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.8809872" y3="0.37951217" z3="3.129234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84102083" y3="-0.55371399" z3="0.98439864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47632921" y3="-1.90364977" z3="0.91485711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79600489" y3="-2.50839043" z3="1.96511886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49875464" y3="-1.74882014" z3="3.09231683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.9100455" y3="-0.42523821" z3="3.22097909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58799457" y3="0.16561587" z3="2.15972372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.65739486" y3="-2.45866482" z3="-0.00619423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44952673" y3="-3.53985476" z3="1.89133573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62071841" y3="-2.32304442" z3="4.11675085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.65802305" y3="0.13739269" z3="4.12053641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88198291" y3="1.21689226" z3="2.22150002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83032075" y3="0.96457141" z3="-4.15458957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.93269" y3="0.12130772" z3="-4.19534417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.75907074" y3="-1.17972905" z3="-4.65553672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.52450748" y3="-1.64005512" z3="-5.10099917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.56993173" y3="-0.78544046" z3="-5.05082491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.94265046" y3="1.97349961" z3="-3.74930245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.91488123" y3="0.44964797" z3="-3.85345107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.90396413" y3="-2.09626585" z3="-4.6428304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.42955622" y3="-2.6652626" z3="-5.45903493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.54757154" y3="-1.14887457" z3="-5.36985107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.20077203" y3="-1.58237175" z3="4.98491474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3230218" y3="-3.49544462" z3="4.02140569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.79652109" y3="-3.14790747" z3="-5.23044759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.89622021" y3="-1.75060634" z3="-4.03531606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.17022872" y3="1.0152239" z3="-1.61580562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.22428058" y3="1.44067817" z3="-2.5938589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55820189" y3="1.20145351" z3="-1.86104202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.99940494" y3="1.75984724" z3="-3.03555443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27296951" y3="0.87816319" z3="-1.09794117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.06996421" y3="1.89160698" z3="-3.21569851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.71544366" y3="1.99421996" z3="-3.80928677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.06394806" y3="2.14898986" z3="-4.02398023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00398345" y3="2.28814343" z3="-4.58428814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.41749754" y3="2.56951223" z3="-4.96966151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.64863983" y3="3.21787901" z3="-3.52042202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.55788917" y3="3.67251689" z3="-4.31864612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.56244046" y3="4.19015616" z3="-3.02390212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.43626268" y3="5.51840847" z3="-3.35428866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.37426129" y3="3.87533427" z3="-2.36637643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.15369917" y3="6.24366378" z3="-2.95987084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.46241796" y3="5.0510143" z3="-4.65584036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.38473607" y3="5.95677922" z3="-4.19389299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.6283713" y3="5.37947639" z3="-5.28375725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.30058973" y3="7.01479441" z3="-4.45741658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.38718016" y3="-2.55905552" z3="-0.47877048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.24422932" y3="-3.32403955" z3="-1.26000919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95835415" y3="-2.99793714" z3="0.35557795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.01489065" y3="-1.76963887" z3="-0.93234128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.06992831" y3="-1.64894044" z3="-1.11977403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29698177" y3="-0.65777121" z3="-1.55052218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.016929" y3="-1.62519914" z3="-0.79787444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.12914297" y3="-2.37186444" z3="-1.94411011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3808,.1352,-.2238;7.4458,.0793,.3283;6.7135,.3909,-.4227;4.8234,1.2672,-2.3399;4.4429,.5621,-1.2095;2.7584,.9658,-3.6669;3.755,1.817,-3.2237;1.5453,2.7574,-4.7074;1.6008,1.427,-4.3632;.6829,3.136,-5.2649;2.8608,-.3619,-3.3869;3.129,.2837,-.9848;2.3853,-.8959,-1.8995;.9215,-.7528,-1.6854;3.0973,-2.2127,-1.7169;-.0629,-3.7404,.7323;.3284,-5.1652,-4.7235;.0513,-4.9702,-3.6836;-.6617,-4.4425,-1.0565;1.0125,-4.4869,-2.7978;-1.2556,-5.2163,-3.2577;-1.6122,-4.9538,-1.9368;.6679,-4.2327,-1.4678;2.0361,-4.2838,-3.1207;-2.0043,-5.5929,-3.9574;-2.6419,-5.1214,-1.6111;-.92,-4.0418,.2677;-2.0896,-3.8832,.8757;-2.9423,-4.3902,.4213;-2.1274,-3.7261,2.3388;-2.2562,-3.5003,5.1299;-3.3101,-4.0398,3.0242;-1.0116,-3.2961,3.0732;-1.0728,-3.1851,4.4589;-3.3724,-3.9308,4.4107;-4.1857,-4.379,2.4635;-.0667,-3.0555,2.58;-.1812,-2.8677,5.0071;-4.2975,-4.1885,4.9336;-2.3033,-3.4212,6.2196;1.5209,-3.7897,-.5361;2.2435,-3.2084,-.9671;.4379,.5212,-4.5594;-3.0534,-2.0033,-.0363;-3.015,-1.2683,1.1462;-2.0164,-.5731,1.5789;-.6655,.4919,1.313;-.8686,1.4129,-.2925;.842,-.5802,1.4708;-.8122,1.6388,2.7871;-4.0546,-1.3373,1.9662;-3.9716,-.7138,3.2377;-.471,.8104,-1.1273;-.2775,2.3461,-.238;-1.9216,1.6893,-.4795;.9368,-.9145,2.5175;1.7486,-.0105,1.2002;.8058,-1.4495,.7944;-.8128,1.0697,3.7336;.0453,2.3357,2.8145;-1.7347,2.2449,2.7439;-3.1166,-1.1003,3.8149;-4.9112,-.9631,3.7486;-3.881,.3795,3.1292;4.841,-.5537,.9844;4.4763,-1.9036,.9149;3.796,-2.5084,1.9651;3.4988,-1.7488,3.0923;3.91,-.4252,3.221;4.588,.1656,2.1597;4.6574,-2.4587,-.0062;3.4495,-3.5399,1.8913;2.6207,-2.323,4.1168;3.658,.1374,4.1205;4.882,1.2169,2.2215;-.8303,.9646,-4.1546;-1.9327,.1213,-4.1953;-1.7591,-1.1797,-4.6555;-.5245,-1.6401,-5.101;.5699,-.7854,-5.0508;-.9427,1.9735,-3.7493;-2.9149,.4496,-3.8535;-2.904,-2.0963,-4.6428;-.4296,-2.6653,-5.459;1.5476,-1.1489,-5.3699;2.2008,-1.5824,4.9849;2.323,-3.4954,4.0214;-2.7965,-3.1479,-5.2304;-3.8962,-1.7506,-4.0353;7.1702,1.0152,-1.6158;6.2243,1.4407,-2.5939;8.5582,1.2015,-1.861;8.9994,1.7598,-3.0356;9.273,.8782,-1.0979;10.07,1.8916,-3.2157;6.7154,1.9942,-3.8093;8.0639,2.149,-4.024;6.004,2.2881,-4.5843;8.4175,2.5695,-4.9697;3.6486,3.2179,-3.5204;2.5579,3.6725,-4.3186;4.5624,4.1902,-3.0239;4.4363,5.5184,-3.3543;5.3743,3.8753,-2.3664;5.1537,6.2437,-2.9599;2.4624,5.051,-4.6558;3.3847,5.9568,-4.1939;1.6284,5.3795,-5.2838;3.3006,7.0148,-4.4574;-4.3872,-2.5591,-.4788;-4.2442,-3.324,-1.26;-4.9584,-2.9979,.3556;-5.0149,-1.7696,-.9323;-2.0699,-1.6489,-1.1198;-2.297,-.6578,-1.5505;-1.0169,-1.6252,-.7979;-2.1291,-2.3719,-1.9441;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648294480452</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008217037757 0.000594794999 0.048474101397 0.005337843388</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021501242 -0.001727627 0.000109996 0.000139448 0.000191693 0.000220208 0.000286381 0.000330376 0.000505240 0.000546997 0.000671123 0.000740197 0.000761160 0.000788147 0.000838010 0.000941538 0.001018398 0.001088662 0.001123931 0.001204252 0.001258847 0.001341207 0.001439150 0.001600984 0.001657287 0.001962252 0.002071192 0.002176434 0.002209193 0.002374264 0.002639544 0.002991600 0.003286042 0.003748059 0.003835263 0.004022461 0.004381565 0.005045240 0.005360510 0.005432893 0.005833328 0.006098060 0.006473873 0.007165598 0.007584849 0.007777136 0.008172693 0.008816487 0.009334407 0.009867522 0.011030006 0.011595018 0.012732273 0.012811078 0.013140038 0.013608480 0.013734241 0.014871158 0.015010325 0.015288575 0.015580308 0.016021942 0.016573595 0.016983633 0.017311599 0.017727381 0.018649103 0.019224073 0.020700816 0.020816080 0.021641231 0.022751295 0.023426544 0.024014414 0.025853051 0.026337454 0.026771893 0.028272948 0.028781538 0.030589267 0.031183408 0.031421423 0.032043300 0.033348327 0.033746611 0.036809324 0.037292503 0.038895934 0.039185462 0.040749985 0.041405324 0.043663190 0.045092318 0.048235450 0.049062213 0.049441121 0.049983306 0.050955480 0.050996836 0.052107922 0.052332585 0.052392443 0.052537378 0.053392896 0.054035042 0.054636688 0.055079716 0.055824243 0.056362979 0.056457129 0.057035306 0.057701095 0.058418837 0.059528159 0.060598508 0.060828740 0.061214077 0.061771214 0.062258583 0.064890918 0.065630432 0.065744458 0.066270757 0.071264762 0.073720112 0.074357843 0.076779487 0.078667243 0.083520571 0.084200711 0.085023560 0.086196448 0.086865322 0.089583528 0.090472809 0.091974303 0.094416592 0.094655115 0.095554503 0.095828075 0.096115374 0.097373900 0.098209135 0.098890846 0.099334250 0.099916381 0.100522811 0.101439320 0.102209958 0.102985954 0.103727476 0.104374658 0.105986026 0.106094009 0.106640881 0.108424824 0.109594357 0.110478952 0.112248510 0.113030678 0.116295123 0.118121910 0.118465352 0.120950196 0.122920061 0.123395930 0.125557607 0.126379485 0.130397289 0.131556069 0.134757956 0.141537312 0.142301769 0.144796459 0.145756471 0.146390492 0.146718908 0.147054100 0.152421994 0.155228437 0.159440978 0.170476592 0.172538118 0.174922758 0.181780067 0.182641662 0.185923949 0.186594252 0.190607711 0.192520525 0.195969612 0.197603759 0.200046124 0.204695499 0.205584991 0.206729964 0.209185555 0.209612582 0.211968354 0.214674078 0.217579377 0.223856411 0.224655441 0.228948118 0.233422478 0.234046971 0.234796710 0.242995279 0.252866160 0.256486486 0.256648598 0.262674586 0.278093276 0.282222596 0.285972769 0.286982026 0.291193968 0.298456058 0.302009693 0.302924205 0.305129206 0.311871143 0.314462804 0.320540135 0.321412280 0.327283931 0.342792106 0.345159400 0.348204815 0.348928697 0.350205711 0.354272328 0.360741974 0.361457502 0.369754736 0.380897741 0.404454995 0.421669795 0.424458505 0.450429936 0.463402326 0.468595403 0.473319695 0.474382830 0.475635323 0.480550880 0.485683693 0.504563124 0.530463064 0.560266281 0.564589827 0.569977358 0.589944131 0.592092587 0.602354066 0.635343601 0.639046081 0.642108501 0.662128393 0.668619533 0.680356542 0.683650174 0.691224022 0.694103226 0.703808684 0.704719268 0.711968405 0.737882440 0.749891884 0.759262639 0.771830447 0.776574952 0.804064515 0.808658643 0.810854094 0.813145204 0.819427188 0.820436750 0.828655118 0.829613628 0.831172122 0.839409836 0.844138784 0.844897774 0.849376281 0.856929741 0.861392661 0.864557053 0.869800957 0.871192361 0.883137030 0.887374462 0.890902836 0.892426018 0.915808915 0.921887904 0.930255644 0.932040829 0.963531920 0.975091991 0.976636820 0.991199471 0.999287944 1.022697661 1.034247998 1.043467133 1.050965102 1.057925764 1.083756227 1.085395187 1.088420667 1.104694627 1.106578514 1.112035966 1.122551808 1.123465089 1.134952266 1.138926153 1.167327096 1.170532999 1.178726896 1.185422584 1.194048214 1.202718265 1.219817614 1.239938776 1.271839407 1.295286676 1.312944378 1.323342962 1.325232435 1.326422294 1.332831093 1.336721947 1.340342387 1.341692215 1.355395661 1.374673661 1.378593968 1.380932610 1.381045088 1.417954058 1.550964104 1.659885196 1.678690875</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">18</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.38040099" y3="0.13471652" z3="-0.22308727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44541314" y3="0.08058544" z3="0.32937949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.7129543" y3="0.39177239" z3="-0.42164693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82237253" y3="1.26705474" z3="-2.33880155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44227459" y3="0.5609384" z3="-1.20887112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7583206" y3="0.9639016" z3="-3.66655488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.75359608" y3="1.81612594" z3="-3.22253902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.54266504" y3="2.75455347" z3="-4.70574895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.60045957" y3="1.42394931" z3="-4.36305855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.67976847" y3="3.13215256" z3="-5.26310725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86214555" y3="-0.36382498" z3="-3.38693382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12862748" y3="0.28119754" z3="-0.98449867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38537455" y3="-0.89804187" z3="-1.90002846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92151632" y3="-0.75476843" z3="-1.68694945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09684239" y3="-2.21516454" z3="-1.71716515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.06486349" y3="-3.73798528" z3="0.73085709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.3220139" y3="-5.16202728" z3="-4.72524092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.0454926" y3="-4.96622288" z3="-3.68526121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.66597636" y3="-4.43783329" z3="-1.05806905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.00783178" y3="-4.48524158" z3="-2.79960976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.261964" y3="-5.20959505" z3="-3.25931611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.61786063" y3="-4.94643148" z3="-1.93837113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.66400736" y3="-4.23085463" z3="-1.46940328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.03186248" y3="-4.28431732" z3="-3.12259105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.01100941" y3="-5.58575152" z3="-3.9587159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.64778639" y3="-5.11200821" z3="-1.61244125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.92275445" y3="-4.03782031" z3="0.26664417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.0909499" y3="-3.88074643" z3="0.87657201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.94510906" y3="-4.38475332" z3="0.42136972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12822358" y3="-3.72384796" z3="2.33931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2553089" y3="-3.50017055" z3="5.13043571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31106929" y3="-4.03655804" z3="3.02493108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01153228" y3="-3.29557823" z3="3.07332337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07194276" y3="-3.18560551" z3="4.45917107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37241766" y3="-3.92874433" z3="4.41155811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.18734425" y3="-4.37426534" z3="2.46441453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06666709" y3="-3.05559656" z3="2.57970513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.17970921" y3="-2.86969633" z3="5.0071551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29749475" y3="-4.18583254" z3="4.93478803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.30164937" y3="-3.42195437" z3="6.22024661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51811278" y3="-3.79060624" z3="-0.53770646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.24182566" y3="-3.21016913" z3="-0.96827618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.44006919" y3="0.51563564" z3="-4.56192919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05609307" y3="-1.99576175" z3="-0.03424711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01480984" y3="-1.26311556" z3="1.14901636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.01473137" y3="-0.56905297" z3="1.58136033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.66232575" y3="0.4931344" z3="1.31455851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.86323813" y3="1.41511867" z3="-0.29078627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84345358" y3="-0.58184283" z3="1.4708379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.80576076" y3="1.64011747" z3="2.78887548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05343771" y3="-1.33192859" z3="1.97071752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.96810873" y3="-0.70975064" z3="3.24247574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.46677682" y3="0.81175323" z3="-1.12560101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.27001879" y3="2.34695475" z3="-0.2360074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.91558593" y3="1.69382047" z3="-0.47787936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9380292" y3="-0.91737322" z3="2.51711219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.75090432" y3="-0.01347784" z3="1.2004271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80536403" y3="-1.45023249" z3="0.79344676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.80664222" y3="1.07078465" z3="3.73527723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.05277205" y3="2.3356707" z3="2.81581175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.7273549" y3="2.24758709" z3="2.74639969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.11290838" y3="-1.09748965" z3="3.81842699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.90737986" y3="-0.95848825" z3="3.75431758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.87659882" y3="0.38362974" z3="3.13494693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84110174" y3="-0.5547764" z3="0.98499895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47583819" y3="-1.90453226" z3="0.91487962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79592435" y3="-2.50961635" z3="1.96519734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.49958094" y3="-1.75058098" z3="3.09299722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.91141779" y3="-0.42722831" z3="3.22217653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.58903673" y3="0.16396408" z3="2.16088823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.65607426" y3="-2.45906508" z3="-0.00663056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44903132" y3="-3.54091553" z3="1.89105382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62176397" y3="-2.32501637" z3="4.11749777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.66005893" y3="0.13500484" z3="4.12216682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88344748" y3="1.21509663" z3="2.22309794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82935932" y3="0.95306938" z3="-4.15511051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.92896369" y3="0.10618299" z3="-4.1990546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.75109814" y3="-1.1917796" z3="-4.66539577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.51509702" y3="-1.64594256" z3="-5.11340722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.57663" y3="-0.78838604" z3="-5.05868193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.94480693" y3="1.95996567" z3="-3.7456909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.91229691" y3="0.42959476" z3="-3.85590812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.89249841" y3="-2.11294391" z3="-4.66036928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.41704923" y3="-2.66879004" z3="-5.47699201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.55548109" y3="-1.14717158" z3="-5.37907212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.20225147" y3="-1.58461377" z3="4.9860628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32377108" y3="-3.49730524" z3="4.02178457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.78485207" y3="-3.1534108" z3="-5.27892169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.88187385" y3="-1.78368621" z3="-4.03205098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16931199" y3="1.01685821" z3="-1.61445519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.22312369" y3="1.44191842" z3="-2.59244153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55715279" y3="1.20430195" z3="-1.85950147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.99799804" y3="1.7635202" z3="-3.03375693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27212127" y3="0.88125781" z3="-1.09648574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.06846649" y3="1.89617056" z3="-3.21377939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.71391872" y3="1.99644108" z3="-3.80756799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0623145" y3="2.15237366" z3="-4.02208525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00227056" y3="2.29012826" z3="-4.58249092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.4156091" y3="2.57358641" z3="-4.96755389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.64540556" y3="3.21702293" z3="-3.51839067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.55386492" y3="3.67080376" z3="-4.31604117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.55810908" y3="4.19009991" z3="-3.02144527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.43014248" y3="5.51843092" z3="-3.35083568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.37055815" y3="3.87581943" z3="-2.36444001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.14683357" y3="6.24430641" z3="-2.9561977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.45645124" y3="5.04943976" z3="-4.65205831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.37774434" y3="5.95606177" z3="-4.18971484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.6217971" y3="5.37730148" z3="-5.27947978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.29214147" y3="7.01416687" z3="-4.45242453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.39047105" y3="-2.5517795" z3="-0.47401752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.24927898" y3="-3.31680512" z3="-1.25560835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.95971627" y3="-2.99120297" z3="0.36152517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.01945057" y3="-1.7621925" z3="-0.92555673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.07265438" y3="-1.64303429" z3="-1.11812159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2958255" y3="-0.6498354" z3="-1.54598164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.01911802" y3="-1.62512308" z3="-0.79760445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.13673738" y3="-2.36311517" z3="-1.94446936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3804,.1347,-.2231;7.4454,.0806,.3294;6.713,.3918,-.4216;4.8224,1.2671,-2.3388;4.4423,.5609,-1.2089;2.7583,.9639,-3.6666;3.7536,1.8161,-3.2225;1.5427,2.7546,-4.7057;1.6005,1.4239,-4.3631;.6798,3.1322,-5.2631;2.8621,-.3638,-3.3869;3.1286,.2812,-.9845;2.3854,-.898,-1.9;.9215,-.7548,-1.6869;3.0968,-2.2152,-1.7172;-.0649,-3.738,.7309;.322,-5.162,-4.7252;.0455,-4.9662,-3.6853;-.666,-4.4378,-1.0581;1.0078,-4.4852,-2.7996;-1.262,-5.2096,-3.2593;-1.6179,-4.9464,-1.9384;.664,-4.2309,-1.4694;2.0319,-4.2843,-3.1226;-2.011,-5.5858,-3.9587;-2.6478,-5.112,-1.6124;-.9228,-4.0378,.2666;-2.0909,-3.8807,.8766;-2.9451,-4.3848,.4214;-2.1282,-3.7238,2.3393;-2.2553,-3.5002,5.1304;-3.3111,-4.0366,3.0249;-1.0115,-3.2956,3.0733;-1.0719,-3.1856,4.4592;-3.3724,-3.9287,4.4116;-4.1873,-4.3743,2.4644;-.0667,-3.0556,2.5797;-.1797,-2.8697,5.0072;-4.2975,-4.1858,4.9348;-2.3016,-3.422,6.2202;1.5181,-3.7906,-.5377;2.2418,-3.2102,-.9683;.4401,.5156,-4.5619;-3.0561,-1.9958,-.0342;-3.0148,-1.2631,1.149;-2.0147,-.5691,1.5814;-.6623,.4931,1.3146;-.8632,1.4151,-.2908;.8435,-.5818,1.4708;-.8058,1.6401,2.7889;-4.0534,-1.3319,1.9707;-3.9681,-.7098,3.2425;-.4668,.8118,-1.1256;-.27,2.347,-.236;-1.9156,1.6938,-.4779;.938,-.9174,2.5171;1.7509,-.0135,1.2004;.8054,-1.4502,.7934;-.8066,1.0708,3.7353;.0528,2.3357,2.8158;-1.7274,2.2476,2.7464;-3.1129,-1.0975,3.8184;-4.9074,-.9585,3.7543;-3.8766,.3836,3.1349;4.8411,-.5548,.985;4.4758,-1.9045,.9149;3.7959,-2.5096,1.9652;3.4996,-1.7506,3.093;3.9114,-.4272,3.2222;4.589,.164,2.1609;4.6561,-2.4591,-.0066;3.449,-3.5409,1.8911;2.6218,-2.325,4.1175;3.6601,.135,4.1222;4.8834,1.2151,2.2231;-.8294,.9531,-4.1551;-1.929,.1062,-4.1991;-1.7511,-1.1918,-4.6654;-.5151,-1.6459,-5.1134;.5766,-.7884,-5.0587;-.9448,1.96,-3.7457;-2.9123,.4296,-3.8559;-2.8925,-2.1129,-4.6604;-.417,-2.6688,-5.477;1.5555,-1.1472,-5.3791;2.2023,-1.5846,4.9861;2.3238,-3.4973,4.0218;-2.7849,-3.1534,-5.2789;-3.8819,-1.7837,-4.0321;7.1693,1.0169,-1.6145;6.2231,1.4419,-2.5924;8.5572,1.2043,-1.8595;8.998,1.7635,-3.0338;9.2721,.8813,-1.0965;10.0685,1.8962,-3.2138;6.7139,1.9964,-3.8076;8.0623,2.1524,-4.0221;6.0023,2.2901,-4.5825;8.4156,2.5736,-4.9676;3.6454,3.217,-3.5184;2.5539,3.6708,-4.316;4.5581,4.1901,-3.0214;4.4301,5.5184,-3.3508;5.3706,3.8758,-2.3644;5.1468,6.2443,-2.9562;2.4565,5.0494,-4.6521;3.3777,5.9561,-4.1897;1.6218,5.3773,-5.2795;3.2921,7.0142,-4.4524;-4.3905,-2.5518,-.474;-4.2493,-3.3168,-1.2556;-4.9597,-2.9912,.3615;-5.0195,-1.7622,-.9256;-2.0727,-1.643,-1.1181;-2.2958,-.6498,-1.546;-1.0191,-1.6251,-.7976;-2.1367,-2.3631,-1.9445;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648333603278</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009159426454 0.000682365811 0.023526565528 0.005337705894</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021531055 -0.001653974 0.000110051 0.000139778 0.000191704 0.000220253 0.000286527 0.000330684 0.000505282 0.000549217 0.000671590 0.000740202 0.000761224 0.000788366 0.000838060 0.000941705 0.001018419 0.001088693 0.001123912 0.001206052 0.001258871 0.001341319 0.001439175 0.001602210 0.001657567 0.001962204 0.002072006 0.002176636 0.002209177 0.002374368 0.002639542 0.002991675 0.003286050 0.003749110 0.003835386 0.004022634 0.004382880 0.005044990 0.005363791 0.005433474 0.005833034 0.006098483 0.006476008 0.007165673 0.007586020 0.007779160 0.008178295 0.008816491 0.009335331 0.009868508 0.011034093 0.011596619 0.012743034 0.012882098 0.013212891 0.013695584 0.013928601 0.014874909 0.015111979 0.015353576 0.015776700 0.016027627 0.016581101 0.017078254 0.017344986 0.017734094 0.018675082 0.019225010 0.020707026 0.020821374 0.021695123 0.022758315 0.023815969 0.024053737 0.025853372 0.026337639 0.026772206 0.028272945 0.028782083 0.030597956 0.031208966 0.031426328 0.032047907 0.033348336 0.033746597 0.036810592 0.037292607 0.038896391 0.039185426 0.040750243 0.041408096 0.043663217 0.045092319 0.048235870 0.049062224 0.049441258 0.049983310 0.050956866 0.050997829 0.052107944 0.052332584 0.052392442 0.052537528 0.053392888 0.054035076 0.054636681 0.055079709 0.055824859 0.056362976 0.056457124 0.057035633 0.057709802 0.058424219 0.059528264 0.060599003 0.060828716 0.061214838 0.061771357 0.062258586 0.064890934 0.065630938 0.065745389 0.066271359 0.071268817 0.073720815 0.074359600 0.076781033 0.078681583 0.083522517 0.084209351 0.085023910 0.086196573 0.086866481 0.089584265 0.090472981 0.091982090 0.094417820 0.094657665 0.095554698 0.095828109 0.096115351 0.097373895 0.098209135 0.098891136 0.099334228 0.099916380 0.100524177 0.101439351 0.102211764 0.102986000 0.103727543 0.104374649 0.105987023 0.106094756 0.106641010 0.108425334 0.109594544 0.110479057 0.112248511 0.113030827 0.116305403 0.118121822 0.118465338 0.120950448 0.123000031 0.123395895 0.125571044 0.126418607 0.130397301 0.131556024 0.134758027 0.141537279 0.142301742 0.144796617 0.145756338 0.146390337 0.146718055 0.147053813 0.152421835 0.155228658 0.159440954 0.170482324 0.172538152 0.174925682 0.181784136 0.182641970 0.185923941 0.186594221 0.190607923 0.192520448 0.195970768 0.197604085 0.200046022 0.204695725 0.205585096 0.206730058 0.209189857 0.209612593 0.211968471 0.214673937 0.217580345 0.223856408 0.224655892 0.228949714 0.233423442 0.234047269 0.234796717 0.242995253 0.252867488 0.256486500 0.256648567 0.262680258 0.278093379 0.282222611 0.285972780 0.286987782 0.291193918 0.298463083 0.302015516 0.302924535 0.305129214 0.311877636 0.314463015 0.320540657 0.321412341 0.327300378 0.342793524 0.345240198 0.348224160 0.348928938 0.350208146 0.354272333 0.360742007 0.361458836 0.369754833 0.380980825 0.404505453 0.421673237 0.424458454 0.450429960 0.463488333 0.468595787 0.473342435 0.474490920 0.475638842 0.480704485 0.485683764 0.504720951 0.530611531 0.560494603 0.564666930 0.570398854 0.589944188 0.592092799 0.602361415 0.635343673 0.639046081 0.642150918 0.662128431 0.668686362 0.680356593 0.683650334 0.691224023 0.694103318 0.703808779 0.704721486 0.712009224 0.737893617 0.749892062 0.759262670 0.771830695 0.776575442 0.804064532 0.808658658 0.810854119 0.813145205 0.819444153 0.820437016 0.828655156 0.829647295 0.831172349 0.839410321 0.844138804 0.844898002 0.849376288 0.856929842 0.861393175 0.864558723 0.869810986 0.871203554 0.883137400 0.887374504 0.890903345 0.892440884 0.915808919 0.921888307 0.930255641 0.932041742 0.963531944 0.975092762 0.976641188 0.991199653 0.999287946 1.022697740 1.034248200 1.043467340 1.050965137 1.057925800 1.083756292 1.085395142 1.088420684 1.104694638 1.106578523 1.112035977 1.122551819 1.123465096 1.134952362 1.138926204 1.167327107 1.170533835 1.178726946 1.185426001 1.194048219 1.202718243 1.219827132 1.239949195 1.275903027 1.295304580 1.312962597 1.323346109 1.325234343 1.326424217 1.332838084 1.337881746 1.340343251 1.341692401 1.355401836 1.374673660 1.378670528 1.380932635 1.381071322 1.417957099 1.550964221 1.659885437 1.679358275</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">19</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37997454" y3="0.13417166" z3="-0.22229775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44493404" y3="0.08200805" z3="0.33057341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71230415" y3="0.39273376" z3="-0.42048024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82119277" y3="1.26699899" z3="-2.33751203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44157054" y3="0.55976435" z3="-1.2081116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.758076" y3="0.96207935" z3="-3.66609983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.75195323" y3="1.81537206" z3="-3.22111842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.53950487" y3="2.75176854" z3="-4.70360221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59988218" y3="1.42081994" z3="-4.36277766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.67607305" y3="3.1284275" z3="-5.26077481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86341508" y3="-0.36565081" z3="-3.3870604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12818233" y3="0.27859891" z3="-0.98415947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3854794" y3="-0.90036077" z3="-1.90070997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92148872" y3="-0.7567605" z3="-1.68846536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09666659" y3="-2.21755795" z3="-1.71776809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.06758758" y3="-3.73449378" z3="0.72908592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.31513691" y3="-5.15957012" z3="-4.72702754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.03924109" y3="-4.96293403" z3="-3.68703459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.67074127" y3="-4.43269839" z3="-1.05967699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.00279723" y3="-4.48402901" z3="-2.80147113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.26865724" y3="-5.20326152" z3="-3.26089279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.62391484" y3="-4.93890409" z3="-1.9399516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.65973034" y3="-4.22902756" z3="-1.471255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.02724827" y3="-4.28542282" z3="-3.12460067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.01874515" y3="-5.57775613" z3="-3.96022339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.65421389" y3="-5.10207101" z3="-1.61394989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.92617557" y3="-4.03272526" z3="0.26521495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.09436881" y3="-3.87428619" z3="0.87569989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.9483492" y3="-4.3792965" z3="0.42174279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.12972383" y3="-3.72041507" z3="2.33926994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25435627" y3="-3.50028777" z3="5.13099108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31224833" y3="-4.03278247" z3="3.02553103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01185349" y3="-3.29486388" z3="3.07311768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.07107141" y3="-3.1865449" z3="4.45921001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37246677" y3="-3.92664991" z3="4.41236445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.18934803" y3="-4.36879006" z3="2.46526636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06688309" y3="-3.05580452" z3="2.57924084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.17802162" y3="-2.87248671" z3="5.00697277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29748644" y3="-4.18327316" z3="4.93593178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.29983595" y3="-3.42326144" z3="6.22092918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51511333" y3="-3.79127844" z3="-0.53939937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.23991577" y3="-3.21224713" z3="-0.96967257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.44257464" y3="0.50932102" z3="-4.56542821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05733622" y3="-1.99121129" z3="-0.03034682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01427626" y3="-1.25772268" z3="1.15287866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.01348908" y3="-0.56415852" z3="1.58325529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.65802197" y3="0.49474413" z3="1.31617043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.85704244" y3="1.41758324" z3="-0.28884216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84508292" y3="-0.58396935" z3="1.47080888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.79843798" y3="1.64130063" z3="2.79103653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05171176" y3="-1.32584943" z3="1.97568135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.96395627" y3="-0.70499999" z3="3.24808283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.46208752" y3="0.81322194" z3="-1.12370082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.26128332" y3="2.34779555" z3="-0.23387285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.90862666" y3="1.69919373" z3="-0.47585901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.93939258" y3="-0.92098807" z3="2.51660354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.75355766" y3="-0.01706799" z3="1.20070871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80490836" y3="-1.45132588" z3="0.7922041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.79962227" y3="1.07165669" z3="3.73724782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.06134328" y3="2.3353321" z3="2.81757219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.71898945" y3="2.25042552" z3="2.74943612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.10837389" y3="-1.09449489" z3="3.82231146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.9027963" y3="-0.95322301" z3="3.76094195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.87126216" y3="0.38834925" z3="3.14146368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84120251" y3="-0.55601061" z3="0.98561381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47533121" y3="-1.90556752" z3="0.91478943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79588396" y3="-2.51109825" z3="1.96514838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50056486" y3="-1.75271186" z3="3.09365946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.91300032" y3="-0.42960761" z3="3.22348235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59021935" y3="0.16202345" z3="2.16217481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.65463762" y3="-2.45952426" z3="-0.00725646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44850975" y3="-3.54220448" z3="1.89052216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62299749" y3="-2.3274335" z3="4.11822165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.66240426" y3="0.13212549" z3="4.12400029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88511264" y3="1.21299283" z3="2.22491325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82860099" y3="0.93981116" z3="-4.15652135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.92488705" y3="0.0887712" z3="-4.20546617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.74207081" y3="-1.20599775" z3="-4.67991401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.50423544" y3="-1.65295023" z3="-5.12978424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.58438756" y3="-0.79161759" z3="-5.06909053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.94787676" y3="1.94424153" z3="-3.74185918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.90938589" y3="0.40660019" z3="-3.86022157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.88017037" y3="-2.13068587" z3="-4.6792522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.40265545" y3="-2.67324593" z3="-5.49986949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.56491735" y3="-1.14489269" z3="-5.39068168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.20410093" y3="-1.5873449" z3="4.98738018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32453871" y3="-3.49956396" z3="4.0219449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.77042958" y3="-3.16654231" z3="-5.29352863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.86919359" y3="-1.80721278" z3="-4.05364409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16826097" y3="1.01877416" z3="-1.61293847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.22179424" y3="1.44345622" z3="-2.59082248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55596127" y3="1.20756472" z3="-1.85775447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.99642462" y3="1.76774864" z3="-3.03169506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.27114835" y3="0.88474459" z3="-1.09484774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.06679633" y3="1.90137904" z3="-3.21157315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.71220715" y3="1.99912247" z3="-3.80558162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.06049058" y3="2.15633501" z3="-4.01989355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00036379" y3="2.29258826" z3="-4.58041379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.4135134" y3="2.5783411" z3="-4.96511059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.64170627" y3="3.21633604" z3="-3.515883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.54923622" y3="3.66924522" z3="-4.31280238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.55326069" y3="4.19025043" z3="-3.01847543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.42334965" y3="5.51867533" z3="-3.34672408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.36642988" y3="3.87652365" z3="-2.36208765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.13922801" y3="6.24520355" z3="-2.9518129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.44979502" y3="5.04802645" z3="-4.64757688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.37001502" y3="5.95553377" z3="-4.18482186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.61453669" y3="5.37524192" z3="-5.27452682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.28287792" y3="7.01372225" z3="-4.4466686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.39359882" y3="-2.54459281" z3="-0.46848393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.25485143" y3="-3.3069316" z3="-1.2531111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.96092442" y3="-2.98595217" z3="0.36730049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.02353887" y3="-1.75324938" z3="-0.91571639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.07603167" y3="-1.63720723" z3="-1.11594499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29589016" y3="-0.64095592" z3="-1.53851033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.02147422" y3="-1.62553381" z3="-0.79832716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.14610331" y3="-2.35324104" z3="-1.94539874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.38,.1342,-.2223;7.4449,.082,.3306;6.7123,.3927,-.4205;4.8212,1.267,-2.3375;4.4416,.5598,-1.2081;2.7581,.9621,-3.6661;3.752,1.8154,-3.2211;1.5395,2.7518,-4.7036;1.5999,1.4208,-4.3628;.6761,3.1284,-5.2608;2.8634,-.3657,-3.3871;3.1282,.2786,-.9842;2.3855,-.9004,-1.9007;.9215,-.7568,-1.6885;3.0967,-2.2176,-1.7178;-.0676,-3.7345,.7291;.3151,-5.1596,-4.727;.0392,-4.9629,-3.687;-.6707,-4.4327,-1.0597;1.0028,-4.484,-2.8015;-1.2687,-5.2033,-3.2609;-1.6239,-4.9389,-1.94;.6597,-4.229,-1.4713;2.0272,-4.2854,-3.1246;-2.0187,-5.5778,-3.9602;-2.6542,-5.1021,-1.6139;-.9262,-4.0327,.2652;-2.0944,-3.8743,.8757;-2.9483,-4.3793,.4217;-2.1297,-3.7204,2.3393;-2.2544,-3.5003,5.131;-3.3122,-4.0328,3.0255;-1.0119,-3.2949,3.0731;-1.0711,-3.1865,4.4592;-3.3725,-3.9266,4.4124;-4.1893,-4.3688,2.4653;-.0669,-3.0558,2.5792;-.178,-2.8725,5.007;-4.2975,-4.1833,4.9359;-2.2998,-3.4233,6.2209;1.5151,-3.7913,-.5394;2.2399,-3.2122,-.9697;.4426,.5093,-4.5654;-3.0573,-1.9912,-.0303;-3.0143,-1.2577,1.1529;-2.0135,-.5642,1.5833;-.658,.4947,1.3162;-.857,1.4176,-.2888;.8451,-.584,1.4708;-.7984,1.6413,2.791;-4.0517,-1.3258,1.9757;-3.964,-.705,3.2481;-.4621,.8132,-1.1237;-.2613,2.3478,-.2339;-1.9086,1.6992,-.4759;.9394,-.921,2.5166;1.7536,-.0171,1.2007;.8049,-1.4513,.7922;-.7996,1.0717,3.7372;.0613,2.3353,2.8176;-1.719,2.2504,2.7494;-3.1084,-1.0945,3.8223;-4.9028,-.9532,3.7609;-3.8713,.3883,3.1415;4.8412,-.556,.9856;4.4753,-1.9056,.9148;3.7959,-2.5111,1.9651;3.5006,-1.7527,3.0937;3.913,-.4296,3.2235;4.5902,.162,2.1622;4.6546,-2.4595,-.0073;3.4485,-3.5422,1.8905;2.623,-2.3274,4.1182;3.6624,.1321,4.124;4.8851,1.213,2.2249;-.8286,.9398,-4.1565;-1.9249,.0888,-4.2055;-1.7421,-1.206,-4.6799;-.5042,-1.653,-5.1298;.5844,-.7916,-5.0691;-.9479,1.9442,-3.7419;-2.9094,.4066,-3.8602;-2.8802,-2.1307,-4.6793;-.4027,-2.6732,-5.4999;1.5649,-1.1449,-5.3907;2.2041,-1.5873,4.9874;2.3245,-3.4996,4.0219;-2.7704,-3.1665,-5.2935;-3.8692,-1.8072,-4.0536;7.1683,1.0188,-1.6129;6.2218,1.4435,-2.5908;8.556,1.2076,-1.8578;8.9964,1.7677,-3.0317;9.2711,.8847,-1.0948;10.0668,1.9014,-3.2116;6.7122,1.9991,-3.8056;8.0605,2.1563,-4.0199;6.0004,2.2926,-4.5804;8.4135,2.5783,-4.9651;3.6417,3.2163,-3.5159;2.5492,3.6692,-4.3128;4.5533,4.1903,-3.0185;4.4233,5.5187,-3.3467;5.3664,3.8765,-2.3621;5.1392,6.2452,-2.9518;2.4498,5.048,-4.6476;3.37,5.9555,-4.1848;1.6145,5.3752,-5.2745;3.2829,7.0137,-4.4467;-4.3936,-2.5446,-.4685;-4.2549,-3.3069,-1.2531;-4.9609,-2.986,.3673;-5.0235,-1.7532,-.9157;-2.076,-1.6372,-1.1159;-2.2959,-.641,-1.5385;-1.0215,-1.6255,-.7983;-2.1461,-2.3532,-1.9454;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648385335280</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007307560743 0.000588189305 0.044916168041 0.005338597803</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021570537 -0.001567242 0.000110239 0.000139924 0.000191710 0.000220322 0.000286532 0.000330791 0.000505508 0.000550786 0.000672082 0.000740243 0.000761427 0.000788347 0.000838345 0.000941710 0.001018429 0.001088693 0.001123896 0.001206996 0.001258876 0.001341290 0.001439288 0.001604294 0.001658712 0.001962232 0.002072605 0.002176657 0.002209192 0.002374363 0.002640537 0.002991674 0.003286050 0.003749477 0.003835605 0.004022671 0.004384394 0.005045096 0.005366426 0.005435192 0.005832900 0.006098755 0.006477288 0.007165710 0.007586077 0.007783936 0.008178106 0.008817004 0.009335795 0.009868508 0.011035138 0.011596684 0.012743822 0.012897801 0.013235866 0.013697422 0.014055288 0.014876262 0.015138868 0.015382252 0.015946243 0.016053432 0.016588293 0.017133630 0.017430791 0.017751086 0.018698834 0.019228008 0.020710583 0.020827068 0.021738063 0.022762546 0.023965549 0.024366359 0.025853933 0.026340659 0.026773276 0.028272958 0.028782942 0.030608708 0.031244939 0.031439654 0.032055704 0.033348384 0.033746587 0.036812756 0.037292796 0.038897167 0.039185371 0.040750412 0.041412935 0.043663306 0.045092319 0.048236501 0.049062249 0.049441453 0.049983305 0.050958108 0.050998938 0.052107992 0.052332584 0.052392441 0.052537692 0.053392872 0.054035162 0.054636668 0.055079717 0.055825743 0.056362975 0.056457125 0.057035961 0.057717323 0.058430959 0.059528254 0.060599395 0.060828735 0.061216365 0.061771731 0.062258664 0.064890928 0.065632156 0.065746013 0.066272407 0.071274855 0.073722024 0.074362651 0.076782655 0.078702525 0.083525114 0.084221821 0.085024075 0.086196702 0.086869731 0.089585603 0.090473535 0.091993308 0.094419419 0.094660480 0.095555053 0.095828267 0.096116170 0.097373894 0.098209138 0.098891060 0.099334293 0.099916389 0.100525065 0.101439392 0.102213313 0.102985997 0.103727522 0.104374638 0.105988452 0.106096230 0.106641174 0.108426345 0.109594714 0.110479202 0.112249214 0.113030888 0.116315329 0.118121825 0.118465314 0.120950447 0.123077927 0.123395858 0.125583921 0.126458704 0.130397284 0.131556042 0.134758086 0.141537235 0.142301718 0.144798046 0.145756668 0.146390890 0.146718712 0.147053697 0.152421604 0.155230113 0.159441026 0.170491490 0.172538315 0.174930353 0.181792986 0.182642514 0.185923970 0.186594190 0.190607991 0.192520452 0.195973311 0.197604017 0.200046067 0.204695978 0.205585149 0.206730263 0.209201412 0.209612621 0.211968338 0.214674078 0.217581556 0.223856538 0.224656399 0.228953088 0.233424169 0.234048081 0.234796690 0.242995287 0.252868933 0.256486504 0.256648625 0.262689474 0.278093553 0.282222616 0.285972777 0.286996350 0.291194573 0.298470452 0.302022608 0.302924477 0.305129288 0.311886840 0.314463528 0.320540892 0.321412347 0.327321269 0.342796099 0.345321297 0.348282560 0.348929143 0.350208931 0.354272350 0.360742184 0.361459320 0.369754930 0.381034452 0.404540433 0.421675598 0.424458476 0.450430019 0.463546600 0.468596060 0.473360620 0.474562318 0.475641611 0.480843078 0.485684047 0.504849768 0.530732968 0.560675520 0.564733754 0.570800565 0.589944232 0.592093145 0.602368768 0.635343736 0.639046228 0.642190033 0.662128498 0.668747814 0.680356692 0.683650623 0.691224023 0.694103263 0.703808861 0.704724012 0.712047281 0.737903859 0.749892210 0.759262666 0.771830906 0.776575921 0.804064573 0.808658726 0.810854306 0.813145207 0.819458954 0.820437232 0.828655419 0.829677457 0.831172750 0.839411625 0.844138796 0.844898180 0.849376286 0.856930542 0.861393209 0.864560196 0.869817562 0.871218839 0.883137644 0.887374552 0.890904564 0.892455958 0.915808982 0.921888712 0.930255642 0.932042469 0.963531964 0.975093294 0.976647406 0.991199631 0.999287967 1.022697756 1.034248193 1.043467898 1.050965155 1.057925853 1.083756290 1.085395166 1.088420682 1.104694641 1.106578523 1.112035985 1.122551839 1.123465098 1.134952492 1.138926257 1.167327106 1.170534527 1.178726993 1.185429350 1.194048225 1.202718358 1.219833767 1.239955756 1.279008136 1.295327273 1.312981939 1.323351068 1.325235794 1.326425560 1.332841254 1.338879119 1.340345316 1.341692701 1.355406071 1.374673658 1.378791324 1.380932645 1.381115853 1.417962373 1.550964300 1.659885745 1.680291249</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">20</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37946733" y3="0.13372954" z3="-0.22157846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44435572" y3="0.08346093" z3="0.33172848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71158503" y3="0.39368925" z3="-0.41939528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82001301" y3="1.26682924" z3="-2.33642831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.44082986" y3="0.55861469" z3="-1.20749409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75784006" y3="0.96018001" z3="-3.66593286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.7503918" y3="1.81447773" z3="-3.2200128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.53686241" y3="2.748954" z3="-4.70224945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59948981" y3="1.41773805" z3="-4.3630813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.67296354" y3="3.12475655" z3="-5.25928189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86447008" y3="-0.3675623" z3="-3.38718934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12769126" y3="0.27604399" z3="-0.98393411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38546102" y3="-0.90261946" z3="-1.90131107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92137262" y3="-0.75904912" z3="-1.68976539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09621438" y3="-2.22009641" z3="-1.71816732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.06931468" y3="-3.73221304" z3="0.72770369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.30871327" y3="-5.15662784" z3="-4.72875072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.0334135" y3="-4.95926741" z3="-3.6887441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.67479781" y3="-4.42846671" z3="-1.06116255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.99831302" y3="-4.48316762" z3="-2.80315889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.27527079" y3="-5.19612421" z3="-3.26272915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.62962427" y3="-4.93138248" z3="-1.94162765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.65607075" y3="-4.22773116" z3="-1.47274992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.02327664" y3="-4.28712827" z3="-3.12624769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.02637602" y3="-5.56815509" z3="-3.96233887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.6602843" y3="-5.09207285" z3="-1.61555764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.92874476" y3="-4.02904456" z3="0.26430673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.09538865" y3="-3.87247359" z3="0.87690462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.95103752" y3="-4.3741733" z3="0.42186324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13037384" y3="-3.71837488" z3="2.33992223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25361125" y3="-3.50010307" z3="5.13164679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3131795" y3="-4.02957307" z3="3.02633337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01172012" y3="-3.29449502" z3="3.07347236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0702532" y3="-3.18712899" z3="4.4596055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3726158" y3="-3.92447559" z3="4.41324179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.1909451" y3="-4.36397894" z3="2.46616903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06676222" y3="-3.05619194" z3="2.5792363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.17661919" y3="-2.87453987" z3="5.00720321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29768771" y3="-4.18042464" z3="4.93704574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2984544" y3="-3.42400363" z3="6.22166712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51263738" y3="-3.79253436" z3="-0.5409027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2383562" y3="-3.21421832" z3="-0.97089686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.44487194" y3="0.50363701" z3="-4.56860859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06050184" y3="-1.983539" z3="-0.02809337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01422887" y3="-1.25265636" z3="1.15592279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.0119313" y3="-0.56008678" z3="1.58553329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.65485528" y3="0.49577234" z3="1.31767734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.85136979" y3="1.4198019" z3="-0.28706674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84639235" y3="-0.58579346" z3="1.47081129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.79186816" y3="1.64239086" z3="2.79286071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.05043609" y3="-1.32066867" z3="1.98077247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.9600048" y3="-0.70075813" z3="3.25325803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.45787281" y3="0.81465194" z3="-1.12204612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.25312634" y3="2.34839137" z3="-0.23177299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.90215494" y3="1.70429165" z3="-0.47415377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94043227" y3="-0.924138" z3="2.51619109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.75579658" y3="-0.02025066" z3="1.20102905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80445047" y3="-1.4522845" z3="0.7912266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.79343162" y3="1.0725233" z3="3.73893882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.06908809" y3="2.33496275" z3="2.81894622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.71144556" y3="2.25303896" z3="2.75203631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.1040837" y3="-1.09149817" z3="3.82610664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.89838987" y3="-0.94817663" z3="3.76738591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.86622533" y3="0.39257612" z3="3.14728089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84118041" y3="-0.5570018" z3="0.98621497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47479745" y3="-1.90639245" z3="0.9148222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7957999" y3="-2.51228673" z3="1.96524702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50137841" y3="-1.7544435" z3="3.09436181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.91433113" y3="-0.43155943" z3="3.22470175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59117585" y3="0.16043372" z3="2.16334709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.65329116" y3="-2.45985715" z3="-0.00768363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44804809" y3="-3.54323863" z3="1.89026425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62403193" y3="-2.32938827" z3="4.11898356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.66440251" y3="0.12976443" z3="4.12565903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88646651" y3="1.21126605" z3="2.22651265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82752985" y3="0.92801087" z3="-4.15764116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.92078477" y3="0.07330182" z3="-4.20899237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.73340128" y3="-1.2183007" z3="-4.68855841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.49434332" y3="-1.65879664" z3="-5.14188317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.59125632" y3="-0.79448119" z3="-5.07759287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.9501174" y3="1.93038072" z3="-3.73950669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.90647673" y3="0.38614981" z3="-3.86282223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.86809713" y3="-2.14772342" z3="-4.69599082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.38966077" y3="-2.67650982" z3="-5.51769468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.57293009" y3="-1.14285421" z3="-5.40113573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.20576193" y3="-1.58963491" z3="4.98869907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32507635" y3="-3.50135991" z3="4.02217209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.75715002" y3="-3.17326983" z3="-5.33844479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.85578277" y3="-1.83938794" z3="-4.05598593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16718833" y3="1.0205221" z3="-1.61156404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.2204825" y3="1.44478117" z3="-2.5894007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55476265" y3="1.21053993" z3="-1.85614345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.99489988" y3="1.77154631" z3="-3.02981261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.2701298" y3="0.88797104" z3="-1.09329835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.06518588" y3="1.90606791" z3="-3.20954062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.71057083" y3="2.00145317" z3="-3.8038326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.05875443" y3="2.15984055" z3="-4.0179286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99856956" y3="2.29470147" z3="-4.57860621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.41154861" y3="2.58254541" z3="-4.96291964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.63832835" y3="3.21550393" z3="-3.51384224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.54512788" y3="3.66759967" z3="-4.31024054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.54879938" y3="4.19019082" z3="-3.01595748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.41719343" y3="5.51868686" z3="-3.34323386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.36256326" y3="3.87699506" z3="-2.36005515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.13235753" y3="6.24579351" z3="-2.94809256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.44381814" y3="5.04653693" z3="-4.64382318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.36305043" y3="5.95485021" z3="-4.18066239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.60802123" y3="5.37320105" z3="-5.27034343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.2745558" y3="7.01311449" z3="-4.44175096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.39702714" y3="-2.5376156" z3="-0.46365346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.25965124" y3="-3.29951009" z3="-1.24890303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.96230735" y3="-2.980267" z3="0.37289259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.02851905" y3="-1.74618774" z3="-0.90851293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.07947454" y3="-1.63069579" z3="-1.11410851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29476682" y3="-0.63150829" z3="-1.53195488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0241635" y3="-1.6257654" z3="-0.79871803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.15575194" y3="-2.3423101" z3="-1.94668305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3795,.1337,-.2216;7.4444,.0835,.3317;6.7116,.3937,-.4194;4.82,1.2668,-2.3364;4.4408,.5586,-1.2075;2.7578,.9602,-3.6659;3.7504,1.8145,-3.22;1.5369,2.749,-4.7022;1.5995,1.4177,-4.3631;.673,3.1248,-5.2593;2.8645,-.3676,-3.3872;3.1277,.276,-.9839;2.3855,-.9026,-1.9013;.9214,-.759,-1.6898;3.0962,-2.2201,-1.7182;-.0693,-3.7322,.7277;.3087,-5.1566,-4.7288;.0334,-4.9593,-3.6887;-.6748,-4.4285,-1.0612;.9983,-4.4832,-2.8032;-1.2753,-5.1961,-3.2627;-1.6296,-4.9314,-1.9416;.6561,-4.2277,-1.4727;2.0233,-4.2871,-3.1262;-2.0264,-5.5682,-3.9623;-2.6603,-5.0921,-1.6156;-.9287,-4.029,.2643;-2.0954,-3.8725,.8769;-2.951,-4.3742,.4219;-2.1304,-3.7184,2.3399;-2.2536,-3.5001,5.1316;-3.3132,-4.0296,3.0263;-1.0117,-3.2945,3.0735;-1.0703,-3.1871,4.4596;-3.3726,-3.9245,4.4132;-4.1909,-4.364,2.4662;-.0668,-3.0562,2.5792;-.1766,-2.8745,5.0072;-4.2977,-4.1804,4.937;-2.2985,-3.424,6.2217;1.5126,-3.7925,-.5409;2.2384,-3.2142,-.9709;.4449,.5036,-4.5686;-3.0605,-1.9835,-.0281;-3.0142,-1.2527,1.1559;-2.0119,-.5601,1.5855;-.6549,.4958,1.3177;-.8514,1.4198,-.2871;.8464,-.5858,1.4708;-.7919,1.6424,2.7929;-4.0504,-1.3207,1.9808;-3.96,-.7008,3.2533;-.4579,.8147,-1.122;-.2531,2.3484,-.2318;-1.9022,1.7043,-.4742;.9404,-.9241,2.5162;1.7558,-.0203,1.201;.8045,-1.4523,.7912;-.7934,1.0725,3.7389;.0691,2.335,2.8189;-1.7114,2.253,2.752;-3.1041,-1.0915,3.8261;-4.8984,-.9482,3.7674;-3.8662,.3926,3.1473;4.8412,-.557,.9862;4.4748,-1.9064,.9148;3.7958,-2.5123,1.9652;3.5014,-1.7544,3.0944;3.9143,-.4316,3.2247;4.5912,.1604,2.1633;4.6533,-2.4599,-.0077;3.448,-3.5432,1.8903;2.624,-2.3294,4.119;3.6644,.1298,4.1257;4.8865,1.2113,2.2265;-.8275,.928,-4.1576;-1.9208,.0733,-4.209;-1.7334,-1.2183,-4.6886;-.4943,-1.6588,-5.1419;.5913,-.7945,-5.0776;-.9501,1.9304,-3.7395;-2.9065,.3861,-3.8628;-2.8681,-2.1477,-4.696;-.3897,-2.6765,-5.5177;1.5729,-1.1429,-5.4011;2.2058,-1.5896,4.9887;2.3251,-3.5014,4.0222;-2.7572,-3.1733,-5.3384;-3.8558,-1.8394,-4.056;7.1672,1.0205,-1.6116;6.2205,1.4448,-2.5894;8.5548,1.2105,-1.8561;8.9949,1.7715,-3.0298;9.2701,.888,-1.0933;10.0652,1.9061,-3.2095;6.7106,2.0015,-3.8038;8.0588,2.1598,-4.0179;5.9986,2.2947,-4.5786;8.4115,2.5825,-4.9629;3.6383,3.2155,-3.5138;2.5451,3.6676,-4.3102;4.5488,4.1902,-3.016;4.4172,5.5187,-3.3432;5.3626,3.877,-2.3601;5.1324,6.2458,-2.9481;2.4438,5.0465,-4.6438;3.3631,5.9549,-4.1807;1.608,5.3732,-5.2703;3.2746,7.0131,-4.4418;-4.397,-2.5376,-.4637;-4.2597,-3.2995,-1.2489;-4.9623,-2.9803,.3729;-5.0285,-1.7462,-.9085;-2.0795,-1.6307,-1.1141;-2.2948,-.6315,-1.532;-1.0242,-1.6258,-.7987;-2.1558,-2.3423,-1.9467;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648433521694</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007318286768 0.000634163054 0.025132203892 0.005337701915</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021623928 -0.001493752 0.000110782 0.000139943 0.000191739 0.000220302 0.000286654 0.000330795 0.000505684 0.000551124 0.000672126 0.000740543 0.000761753 0.000788338 0.000838359 0.000941807 0.001018459 0.001088729 0.001124015 0.001207718 0.001258989 0.001341458 0.001439716 0.001604343 0.001658850 0.001963725 0.002074458 0.002179214 0.002209787 0.002374564 0.002640501 0.002992574 0.003286064 0.003751912 0.003835583 0.004022885 0.004386320 0.005047349 0.005374181 0.005436136 0.005832856 0.006099066 0.006478467 0.007166630 0.007589351 0.007790190 0.008190472 0.008816773 0.009336723 0.009868515 0.011036702 0.011596670 0.012744934 0.012900608 0.013242660 0.013697743 0.014134745 0.014876488 0.015153677 0.015397447 0.015995204 0.016157334 0.016601094 0.017149269 0.017527769 0.017792906 0.018732177 0.019237023 0.020715324 0.020831770 0.021779502 0.022765924 0.023977952 0.024829045 0.025854777 0.026344592 0.026775900 0.028272955 0.028783181 0.030624429 0.031299343 0.031466773 0.032074263 0.033348463 0.033746561 0.036817798 0.037292908 0.038898082 0.039185383 0.040750886 0.041421623 0.043663665 0.045092374 0.048237489 0.049062277 0.049441743 0.049983316 0.050959630 0.051001334 0.052108060 0.052332583 0.052392442 0.052537734 0.053392870 0.054035189 0.054636652 0.055079712 0.055827114 0.056362975 0.056457136 0.057036249 0.057724129 0.058439159 0.059528330 0.060599304 0.060828816 0.061217671 0.061772029 0.062258729 0.064890949 0.065633832 0.065746744 0.066274259 0.071284235 0.073724403 0.074368159 0.076786720 0.078732925 0.083529797 0.084240932 0.085024261 0.086197027 0.086875738 0.089587654 0.090474932 0.092010208 0.094421912 0.094664466 0.095555523 0.095828334 0.096119838 0.097373900 0.098209137 0.098891363 0.099334799 0.099916457 0.100526569 0.101439442 0.102217542 0.102986082 0.103727646 0.104374628 0.105990216 0.106098713 0.106641921 0.108426117 0.109595005 0.110480114 0.112248920 0.113031035 0.116324132 0.118121936 0.118465318 0.120950872 0.123141493 0.123396045 0.125594003 0.126491346 0.130397315 0.131555911 0.134758305 0.141537221 0.142301826 0.144798403 0.145756774 0.146391776 0.146718792 0.147053419 0.152421616 0.155230395 0.159440981 0.170509724 0.172538650 0.174937297 0.181804718 0.182642785 0.185923948 0.186594166 0.190608015 0.192520222 0.195979369 0.197604003 0.200045940 0.204695879 0.205585184 0.206730636 0.209223582 0.209612711 0.211968601 0.214673761 0.217584093 0.223856545 0.224656911 0.228959622 0.233425748 0.234049587 0.234796739 0.242995820 0.252869210 0.256486503 0.256649204 0.262703517 0.278093851 0.282222617 0.285972787 0.287008004 0.291198628 0.298479716 0.302030628 0.302924843 0.305129348 0.311899984 0.314464442 0.320544351 0.321412387 0.327350210 0.342798277 0.345420390 0.348408861 0.348929118 0.350209437 0.354272414 0.360742232 0.361459564 0.369754942 0.381085053 0.404575552 0.421677855 0.424458705 0.450430077 0.463591579 0.468596077 0.473367894 0.474622623 0.475644022 0.481003756 0.485684033 0.504969564 0.530842113 0.560833269 0.564795996 0.571205434 0.589944320 0.592093497 0.602376727 0.635343847 0.639046217 0.642226532 0.662128525 0.668807115 0.680356749 0.683650827 0.691224023 0.694103631 0.703808934 0.704728125 0.712085401 0.737913990 0.749892346 0.759262679 0.771831075 0.776576402 0.804064573 0.808658743 0.810854302 0.813145207 0.819472582 0.820437548 0.828655791 0.829706019 0.831173725 0.839411691 0.844138793 0.844898344 0.849376292 0.856930800 0.861394224 0.864561500 0.869821191 0.871238356 0.883138084 0.887374582 0.890905013 0.892469612 0.915809156 0.921889019 0.930255693 0.932043265 0.963532028 0.975093861 0.976653087 0.991199602 0.999287993 1.022697773 1.034248188 1.043468609 1.050965157 1.057925884 1.083756360 1.085395127 1.088420763 1.104694633 1.106578540 1.112035993 1.122551864 1.123465098 1.134952618 1.138926251 1.167327103 1.170534966 1.178727040 1.185431834 1.194048233 1.202718953 1.219838542 1.239959764 1.281672945 1.295356578 1.313002330 1.323358104 1.325236698 1.326426528 1.332842629 1.339752463 1.340352820 1.341693283 1.355410485 1.374673661 1.378941470 1.380932642 1.381179666 1.417969346 1.550964352 1.659886163 1.681645317</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">21</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37881469" y3="0.13319874" z3="-0.22078197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44362286" y3="0.08497594" z3="0.33300332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.71070516" y3="0.3946616" z3="-0.41820244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81865407" y3="1.26661714" z3="-2.33521738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43991444" y3="0.55736431" z3="-1.20677607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75733467" y3="0.95833232" z3="-3.66543116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.74862113" y3="1.81358994" z3="-3.21869065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.53378632" y3="2.74621791" z3="-4.70041227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59873444" y3="1.4147904" z3="-4.3627634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.66946252" y3="3.12106987" z3="-5.25743548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86531113" y3="-0.36941941" z3="-3.38726049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12703648" y3="0.2733891" z3="-0.98361663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38540925" y3="-0.90515649" z3="-1.9018823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92117794" y3="-0.76142954" z3="-1.69101108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09605696" y3="-2.22258716" z3="-1.71873813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.07177641" y3="-3.7295783" z3="0.72618971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.30188751" y3="-5.15304287" z3="-4.73090105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.02726511" y3="-4.955194" z3="-3.69081565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.67932804" y3="-4.42342987" z3="-1.06279936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.99354521" y3="-4.4821637" z3="-2.80502897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.28200903" y3="-5.1882721" z3="-3.26480142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.63566119" y3="-4.92273747" z3="-1.94361573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.65211469" y3="-4.2264465" z3="-1.47455948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01905486" y3="-4.2889291" z3="-3.12809497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.03425399" y3="-5.55762717" z3="-3.96457163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.66684065" y3="-5.0803783" z3="-1.61768293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.93188468" y3="-4.02453817" z3="0.26297221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.09881252" y3="-3.86589202" z3="0.87575569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.95398272" y3="-4.36927141" z3="0.42233598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1317804" y3="-3.71516913" z3="2.33980661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25271033" y3="-3.50008479" z3="5.13217534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31417326" y3="-4.02617546" z3="3.02691771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01203111" y3="-3.2938712" z3="3.07323606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06943407" y3="-3.18797743" z3="4.45961542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37258794" y3="-3.9225196" z3="4.41401564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.19270026" y3="-4.35913406" z3="2.46708947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06696669" y3="-3.05645741" z3="2.57877273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.17504861" y3="-2.87707512" z3="5.00699612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29762314" y3="-4.17798251" z3="4.93812735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.29679731" y3="-3.4249266" z3="6.22230064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51015626" y3="-3.79422403" z3="-0.54244106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.23671625" y3="-3.2170772" z3="-0.97204627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.44710435" y3="0.49776689" z3="-4.57200877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06126878" y3="-1.98000386" z3="-0.02419716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01366271" y3="-1.24785539" z3="1.1597219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.01107756" y3="-0.55510974" z3="1.586877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.65061377" y3="0.49722857" z3="1.3190577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.84482733" y3="1.42242337" z3="-0.28518224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84778014" y3="-0.58821151" z3="1.47078791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.78487023" y3="1.64330245" z3="2.79481753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.04847187" y3="-1.31542985" z3="1.98571965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.95573686" y3="-0.6964467" z3="3.25867903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.45253832" y3="0.81654457" z3="-1.12022945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.24403177" y3="2.34932866" z3="-0.22917045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.89474966" y3="1.7099498" z3="-0.47244024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94147311" y3="-0.9278562" z3="2.51574779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.75822095" y3="-0.02416974" z3="1.20128674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80377472" y3="-1.45375806" z3="0.79011592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.78687107" y3="1.07313588" z3="3.74070983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.07732938" y3="2.33433633" z3="2.82060891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.70337232" y3="2.25562515" z3="2.75472186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.09935109" y3="-1.08865176" z3="3.82985708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.89361002" y3="-0.94337153" z3="3.77390587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.86094922" y3="0.39681993" z3="3.15322197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84104407" y3="-0.55812514" z3="0.98687786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47411083" y3="-1.90733534" z3="0.91488624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79560554" y3="-2.51361965" z3="1.96540068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50216216" y3="-1.75633793" z3="3.09515155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.91563751" y3="-0.43366906" z3="3.22601942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59206876" y3="0.15870155" z3="2.16460525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.65170411" y3="-2.4602854" z3="-0.00811145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44742956" y3="-3.54440339" z3="1.89002396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62509782" y3="-2.33152458" z3="4.11988643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.6664371" y3="0.12721826" z3="4.12745224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88779702" y3="1.20938825" z3="2.22820749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82695514" y3="0.91513753" z3="-4.15883011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.91692408" y3="0.05614382" z3="-4.21556688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.72464985" y3="-1.23212124" z3="-4.70414223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.48367525" y3="-1.66535736" z3="-5.15868692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.59881306" y3="-0.79715985" z3="-5.08801975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.95331451" y3="1.91493569" z3="-3.73487737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.90362305" y3="0.36309903" z3="-3.86655561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.85504725" y3="-2.1657381" z3="-4.71386306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.37533242" y3="-2.68061279" z3="-5.54008815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.58216581" y3="-1.140029" z3="-5.41232549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.20729227" y3="-1.59201241" z3="4.99003149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32585863" y3="-3.50336959" z3="4.02271593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.74098767" y3="-3.18695819" z3="-5.35064214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.84185902" y3="-1.86452014" z3="-4.07179288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16593599" y3="1.02234818" z3="-1.61005891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.21897606" y3="1.44613786" z3="-2.58785008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.5533722" y3="1.21371393" z3="-1.85437524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.99315556" y3="1.77561371" z3="-3.02775122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26893471" y3="0.89143242" z3="-1.09159136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.06334744" y3="1.91112097" z3="-3.20730839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.70871012" y3="2.00387291" z3="-3.80193816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.05678359" y3="2.16355648" z3="-4.01579239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99653923" y3="2.296844" z3="-4.57666523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.40932652" y3="2.58700808" z3="-4.96054342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.63469125" y3="3.21465969" z3="-3.51159109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.54070884" y3="3.66595176" z3="-4.30740996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.54406858" y3="4.19011757" z3="-3.01323356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.41070353" y3="5.51869292" z3="-3.33948703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.35842908" y3="3.87744195" z3="-2.35782143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.12509447" y3="6.24639964" z3="-2.94404726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.43755849" y3="5.04500277" z3="-4.6398794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.35576378" y3="5.95413853" z3="-4.17627252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.60122936" y3="5.37106665" z3="-5.26600004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.26586024" y3="7.01248364" z3="-4.43655774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.39972442" y3="-2.53145682" z3="-0.45816305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.26468609" y3="-3.29234991" z3="-1.24483344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.96395091" y3="-2.97429164" z3="0.37898207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.03127477" y3="-1.73870829" z3="-0.90069087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.08324989" y3="-1.62381407" z3="-1.11222658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29467772" y3="-0.62005548" z3="-1.52129529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.02649472" y3="-1.62688234" z3="-0.80107241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.16798287" y3="-2.32785999" z3="-1.95066211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3788,.1332,-.2208;7.4436,.085,.333;6.7107,.3947,-.4182;4.8187,1.2666,-2.3352;4.4399,.5574,-1.2068;2.7573,.9583,-3.6654;3.7486,1.8136,-3.2187;1.5338,2.7462,-4.7004;1.5987,1.4148,-4.3628;.6695,3.1211,-5.2574;2.8653,-.3694,-3.3873;3.127,.2734,-.9836;2.3854,-.9052,-1.9019;.9212,-.7614,-1.691;3.0961,-2.2226,-1.7187;-.0718,-3.7296,.7262;.3019,-5.153,-4.7309;.0273,-4.9552,-3.6908;-.6793,-4.4234,-1.0628;.9935,-4.4822,-2.805;-1.282,-5.1883,-3.2648;-1.6357,-4.9227,-1.9436;.6521,-4.2264,-1.4746;2.0191,-4.2889,-3.1281;-2.0343,-5.5576,-3.9646;-2.6668,-5.0804,-1.6177;-.9319,-4.0245,.263;-2.0988,-3.8659,.8758;-2.954,-4.3693,.4223;-2.1318,-3.7152,2.3398;-2.2527,-3.5001,5.1322;-3.3142,-4.0262,3.0269;-1.012,-3.2939,3.0732;-1.0694,-3.188,4.4596;-3.3726,-3.9225,4.414;-4.1927,-4.3591,2.4671;-.067,-3.0565,2.5788;-.175,-2.8771,5.007;-4.2976,-4.178,4.9381;-2.2968,-3.4249,6.2223;1.5102,-3.7942,-.5424;2.2367,-3.2171,-.972;.4471,.4978,-4.572;-3.0613,-1.98,-.0242;-3.0137,-1.2479,1.1597;-2.0111,-.5551,1.5869;-.6506,.4972,1.3191;-.8448,1.4224,-.2852;.8478,-.5882,1.4708;-.7849,1.6433,2.7948;-4.0485,-1.3154,1.9857;-3.9557,-.6964,3.2587;-.4525,.8165,-1.1202;-.244,2.3493,-.2292;-1.8947,1.7099,-.4724;.9415,-.9279,2.5157;1.7582,-.0242,1.2013;.8038,-1.4538,.7901;-.7869,1.0731,3.7407;.0773,2.3343,2.8206;-1.7034,2.2556,2.7547;-3.0994,-1.0887,3.8299;-4.8936,-.9434,3.7739;-3.8609,.3968,3.1532;4.841,-.5581,.9869;4.4741,-1.9073,.9149;3.7956,-2.5136,1.9654;3.5022,-1.7563,3.0952;3.9156,-.4337,3.226;4.5921,.1587,2.1646;4.6517,-2.4603,-.0081;3.4474,-3.5444,1.89;2.6251,-2.3315,4.1199;3.6664,.1272,4.1275;4.8878,1.2094,2.2282;-.827,.9151,-4.1588;-1.9169,.0561,-4.2156;-1.7246,-1.2321,-4.7041;-.4837,-1.6654,-5.1587;.5988,-.7972,-5.088;-.9533,1.9149,-3.7349;-2.9036,.3631,-3.8666;-2.855,-2.1657,-4.7139;-.3753,-2.6806,-5.5401;1.5822,-1.14,-5.4123;2.2073,-1.592,4.99;2.3259,-3.5034,4.0227;-2.741,-3.187,-5.3506;-3.8419,-1.8645,-4.0718;7.1659,1.0223,-1.6101;6.219,1.4461,-2.5879;8.5534,1.2137,-1.8544;8.9932,1.7756,-3.0278;9.2689,.8914,-1.0916;10.0633,1.9111,-3.2073;6.7087,2.0039,-3.8019;8.0568,2.1636,-4.0158;5.9965,2.2968,-4.5767;8.4093,2.587,-4.9605;3.6347,3.2147,-3.5116;2.5407,3.666,-4.3074;4.5441,4.1901,-3.0132;4.4107,5.5187,-3.3395;5.3584,3.8774,-2.3578;5.1251,6.2464,-2.944;2.4376,5.045,-4.6399;3.3558,5.9541,-4.1763;1.6012,5.3711,-5.266;3.2659,7.0125,-4.4366;-4.3997,-2.5315,-.4582;-4.2647,-3.2923,-1.2448;-4.964,-2.9743,.379;-5.0313,-1.7387,-.9007;-2.0832,-1.6238,-1.1122;-2.2947,-.6201,-1.5213;-1.0265,-1.6269,-.8011;-2.168,-2.3279,-1.9507;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648489442643</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007554832535 0.000626708194 0.042700452945 0.005337819816</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021684637 -0.001567664 0.000111347 0.000140204 0.000191860 0.000220647 0.000286850 0.000331001 0.000505684 0.000551915 0.000672179 0.000740591 0.000761953 0.000788333 0.000838916 0.000941804 0.001018500 0.001088733 0.001124257 0.001209943 0.001259006 0.001341502 0.001439747 0.001604706 0.001661036 0.001966230 0.002074897 0.002180664 0.002210710 0.002375049 0.002641994 0.002992934 0.003286112 0.003754085 0.003836372 0.004022843 0.004389160 0.005053127 0.005387423 0.005445363 0.005835941 0.006099314 0.006478717 0.007168624 0.007588382 0.007805458 0.008196090 0.008817706 0.009338227 0.009868426 0.011037945 0.011596803 0.012744920 0.012902616 0.013244789 0.013697575 0.014174457 0.014876626 0.015166519 0.015407044 0.015998984 0.016228849 0.016618610 0.017147932 0.017588426 0.017865453 0.018760286 0.019258137 0.020718884 0.020836833 0.021819676 0.022769948 0.023978300 0.025158585 0.025855853 0.026347813 0.026780938 0.028272955 0.028783786 0.030641491 0.031347944 0.031541979 0.032117673 0.033348449 0.033746605 0.036827738 0.037293783 0.038900406 0.039185328 0.040751786 0.041438293 0.043664114 0.045092765 0.048239235 0.049062311 0.049442278 0.049983306 0.050961837 0.051004623 0.052108277 0.052332583 0.052392445 0.052538063 0.053392956 0.054035284 0.054636651 0.055079728 0.055828974 0.056362990 0.056457163 0.057036427 0.057727534 0.058447687 0.059528457 0.060599236 0.060829069 0.061218986 0.061772565 0.062258825 0.064891061 0.065637122 0.065746941 0.066277845 0.071298379 0.073727276 0.074379385 0.076789409 0.078781788 0.083535557 0.084272616 0.085024339 0.086198011 0.086882210 0.089590810 0.090477215 0.092037390 0.094425216 0.094669358 0.095555538 0.095828315 0.096131918 0.097373911 0.098209139 0.098894113 0.099335125 0.099916577 0.100530796 0.101439800 0.102219327 0.102986170 0.103727560 0.104374617 0.105992638 0.106103724 0.106642263 0.108426052 0.109595029 0.110482238 0.112249108 0.113031043 0.116328035 0.118123366 0.118465381 0.120950706 0.123168290 0.123395978 0.125598976 0.126501437 0.130397283 0.131555801 0.134758309 0.141537890 0.142301747 0.144800387 0.145757722 0.146396347 0.146723568 0.147053667 0.152421623 0.155231412 0.159441183 0.170542565 0.172539064 0.174948929 0.181827231 0.182642957 0.185924094 0.186594224 0.190608240 0.192520266 0.195989462 0.197604127 0.200046217 0.204696070 0.205585197 0.206731424 0.209274648 0.209612911 0.211968735 0.214674098 0.217588051 0.223856731 0.224657268 0.228972763 0.233428065 0.234052882 0.234796684 0.242998324 0.252869174 0.256486751 0.256653097 0.262725499 0.278094661 0.282222622 0.285972779 0.287024894 0.291212991 0.298492125 0.302047851 0.302924704 0.305129354 0.311919356 0.314466292 0.320560419 0.321412380 0.327391881 0.342804348 0.345525503 0.348699329 0.348929197 0.350209371 0.354272692 0.360742520 0.361459548 0.369754990 0.381119436 0.404604040 0.421679408 0.424458671 0.450430214 0.463613050 0.468596134 0.473379327 0.474644484 0.475645093 0.481185241 0.485684419 0.505063287 0.530926155 0.560954545 0.564848635 0.571560550 0.589944324 0.592094058 0.602384848 0.635345117 0.639046803 0.642257972 0.662128546 0.668856213 0.680356819 0.683651134 0.691224029 0.694103893 0.703808971 0.704737890 0.712118689 0.737922270 0.749892426 0.759262678 0.771831239 0.776576782 0.804064799 0.808659204 0.810856610 0.813145204 0.819483018 0.820437664 0.828656772 0.829728866 0.831174591 0.839413817 0.844138781 0.844898536 0.849376304 0.856932702 0.861394264 0.864562476 0.869821583 0.871268849 0.883138437 0.887374622 0.890906090 0.892482665 0.915809932 0.921889295 0.930255687 0.932043636 0.963532356 0.975094149 0.976661707 0.991200237 0.999288073 1.022697774 1.034248589 1.043470082 1.050965165 1.057925900 1.083756960 1.085395370 1.088421151 1.104694637 1.106578609 1.112036000 1.122551888 1.123465098 1.134952788 1.138926272 1.167327200 1.170535393 1.178727126 1.185434998 1.194048245 1.202722079 1.219843190 1.239961768 1.283317255 1.295387384 1.313022034 1.323369120 1.325238231 1.326427837 1.332843438 1.340238885 1.340417692 1.341694302 1.355413935 1.374673661 1.379142363 1.380932634 1.381285864 1.417975556 1.550964348 1.659886818 1.683992799</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">22</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37821413" y3="0.13274928" z3="-0.219995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44295138" y3="0.08654284" z3="0.33421522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70987671" y3="0.3956713" z3="-0.41706682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81732369" y3="1.26638564" z3="-2.33406928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43906262" y3="0.55616049" z3="-1.20608396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75701416" y3="0.95622623" z3="-3.66521608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.74690084" y3="1.8125628" z3="-3.21752946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.53094685" y3="2.74308714" z3="-4.69909843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59829185" y3="1.41136952" z3="-4.3631181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.66610041" y3="3.11704643" z3="-5.25592387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.8662557" y3="-0.37153128" z3="-3.38730793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12644807" y3="0.27073081" z3="-0.98331541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38541548" y3="-0.90761954" z3="-1.90237188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92108659" y3="-0.76404368" z3="-1.69208426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09579039" y3="-2.22524271" z3="-1.71903961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.07340377" y3="-3.72711867" z3="0.72484628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.29537654" y3="-5.15013196" z3="-4.73252733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.02139271" y3="-4.95136528" z3="-3.69245885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.68335799" y3="-4.41857684" z3="-1.0643749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.98905794" y3="-4.48117278" z3="-2.80678134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.28861494" y3="-5.18078593" z3="-3.26645463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.6414267" y3="-4.91434666" z3="-1.94526634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.64852079" y3="-4.22496789" z3="-1.47612739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01507314" y3="-4.29073147" z3="-3.12988238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.04175091" y3="-5.54829097" z3="-3.96617514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.67298578" y3="-5.06919853" z3="-1.61927644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.93434972" y3="-4.02050936" z3="0.26203246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.09965461" y3="-3.86393065" z3="0.87696824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.95660675" y3="-4.36378426" z3="0.42227893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13231194" y3="-3.71303127" z3="2.34041775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25162315" y3="-3.50003264" z3="5.13281279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31484732" y3="-4.02320431" z3="3.02776257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01179816" y3="-3.29328024" z3="3.07348747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06839429" y3="-3.18845893" z3="4.45991166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37236377" y3="-3.92067836" z3="4.41494577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.1940163" y3="-4.35478805" z3="2.46814771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06684262" y3="-3.05643831" z3="2.57858888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.17342243" y3="-2.87893974" z3="5.00706933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29734384" y3="-4.17569061" z3="4.93935686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.29499722" y3="-3.42582391" z3="6.22302361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.50787139" y3="-3.79576408" z3="-0.54397539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.23540142" y3="-3.21935358" z3="-0.97322096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.44951562" y3="0.49146531" z3="-4.57480911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06451414" y3="-1.97197779" z3="-0.02252458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.013793" y3="-1.24298142" z3="1.16247129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00988151" y3="-0.55082901" z3="1.58882583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.64743142" y3="0.49790655" z3="1.32043396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.83835633" y3="1.42473404" z3="-0.28336101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.84891598" y3="-0.59063072" z3="1.47076676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.77814962" y3="1.64401585" z3="2.7965694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.04718119" y3="-1.31096593" z3="1.99075017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.95170293" y3="-0.69284313" z3="3.26376906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.4473626" y3="0.81831939" z3="-1.11861739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.23479919" y3="2.34980226" z3="-0.22638075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.88728236" y3="1.71561162" z3="-0.4709794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94233924" y3="-0.93144833" z3="2.51535802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.76033331" y3="-0.02806588" z3="1.20149406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80308809" y3="-1.4553891" z3="0.78922831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.78070075" y3="1.07361527" z3="3.74232039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.08532658" y3="2.33345877" z3="2.82199787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.69557583" y3="2.25800995" z3="2.75719399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.09479215" y3="-1.08603657" z3="3.83346626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.88897991" y3="-0.93915635" z3="3.78042867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.8561099" y3="0.40043254" z3="3.15889239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84093749" y3="-0.55908934" z3="0.98757082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47352025" y3="-1.90814628" z3="0.91508946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79549573" y3="-2.51475161" z3="1.96571412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5029418" y3="-1.75795586" z3="3.09602777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.91686826" y3="-0.43547795" z3="3.22731789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59290062" y3="0.15720871" z3="2.165816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.65029691" y3="-2.46064839" z3="-0.00834064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44697389" y3="-3.54539751" z3="1.89005545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62616354" y3="-2.33334682" z3="4.12088639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.66831818" y3="0.12504958" z3="4.12915287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.88898432" y3="1.2077741" z3="2.22976904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82552945" y3="0.90236604" z3="-4.15878848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.91203875" y3="0.03952531" z3="-4.21664959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.71517218" y3="-1.24557749" z3="-4.70917589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.47347284" y3="-1.67188137" z3="-5.16908036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.60566241" y3="-0.80046343" z3="-5.09620543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.95527181" y3="1.90008928" z3="-3.73196883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.89982093" y3="0.34150814" z3="-3.86700646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.84324507" y3="-2.18303133" z3="-4.72871982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.3620417" y3="-2.68425311" z3="-5.55775772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.58999787" y3="-1.13796134" z3="-5.42358182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.20897562" y3="-1.59412369" z3="4.99156836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3264837" y3="-3.50507182" z3="4.02325105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.72938736" y3="-3.19484724" z3="-5.39334259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.8293011" y3="-1.8935985" z3="-4.08049839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16471478" y3="1.02414437" z3="-1.6086563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.2174893" y3="1.447429" z3="-2.58640442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55200464" y3="1.21682652" z3="-1.85276524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.99140147" y3="1.77953188" z3="-3.02590154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26778121" y3="0.89488526" z3="-1.09003827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.06149241" y3="1.9160117" z3="-3.20532331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.70683046" y3="2.00611998" z3="-3.80021266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.05478445" y3="2.16705603" z3="-4.01387918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99446391" y3="2.29876403" z3="-4.57488854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.4070529" y3="2.5911714" z3="-4.95843549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.63109305" y3="3.21367373" z3="-3.50958208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.53636532" y3="3.66406908" z3="-4.30491958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.53936673" y3="4.18995292" z3="-3.01080719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.4043047" y3="5.51856831" z3="-3.3362022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.35432023" y3="3.87786106" z3="-2.35584746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.1179647" y3="6.24689147" z3="-2.9405737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.43136103" y3="5.0432474" z3="-4.63632999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.34857532" y3="5.95322926" z3="-4.17239214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.59453188" y3="5.36869966" z3="-5.26210142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.25733587" y3="7.01161655" z3="-4.43204123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.40283397" y3="-2.5243557" z3="-0.4546973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.26864673" y3="-3.28420765" z3="-1.24247922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9655464" y3="-2.96850967" z3="0.38274257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.03566436" y3="-1.7314493" z3="-0.89513996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.08722207" y3="-1.61543603" z3="-1.11088894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29501538" y3="-0.6086657" z3="-1.51370431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.02977669" y3="-1.62386674" z3="-0.80282455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.17827143" y3="-2.31323776" z3="-1.95326726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3782,.1327,-.22;7.443,.0865,.3342;6.7099,.3957,-.4171;4.8173,1.2664,-2.3341;4.4391,.5562,-1.2061;2.757,.9562,-3.6652;3.7469,1.8126,-3.2175;1.5309,2.7431,-4.6991;1.5983,1.4114,-4.3631;.6661,3.117,-5.2559;2.8663,-.3715,-3.3873;3.1264,.2707,-.9833;2.3854,-.9076,-1.9024;.9211,-.764,-1.6921;3.0958,-2.2252,-1.719;-.0734,-3.7271,.7248;.2954,-5.1501,-4.7325;.0214,-4.9514,-3.6925;-.6834,-4.4186,-1.0644;.9891,-4.4812,-2.8068;-1.2886,-5.1808,-3.2665;-1.6414,-4.9143,-1.9453;.6485,-4.225,-1.4761;2.0151,-4.2907,-3.1299;-2.0418,-5.5483,-3.9662;-2.673,-5.0692,-1.6193;-.9343,-4.0205,.262;-2.0997,-3.8639,.877;-2.9566,-4.3638,.4223;-2.1323,-3.713,2.3404;-2.2516,-3.5,5.1328;-3.3148,-4.0232,3.0278;-1.0118,-3.2933,3.0735;-1.0684,-3.1885,4.4599;-3.3724,-3.9207,4.4149;-4.194,-4.3548,2.4681;-.0668,-3.0564,2.5786;-.1734,-2.8789,5.0071;-4.2973,-4.1757,4.9394;-2.295,-3.4258,6.223;1.5079,-3.7958,-.544;2.2354,-3.2194,-.9732;.4495,.4915,-4.5748;-3.0645,-1.972,-.0225;-3.0138,-1.243,1.1625;-2.0099,-.5508,1.5888;-.6474,.4979,1.3204;-.8384,1.4247,-.2834;.8489,-.5906,1.4708;-.7781,1.644,2.7966;-4.0472,-1.311,1.9908;-3.9517,-.6928,3.2638;-.4474,.8183,-1.1186;-.2348,2.3498,-.2264;-1.8873,1.7156,-.471;.9423,-.9314,2.5154;1.7603,-.0281,1.2015;.8031,-1.4554,.7892;-.7807,1.0736,3.7423;.0853,2.3335,2.822;-1.6956,2.258,2.7572;-3.0948,-1.086,3.8335;-4.889,-.9392,3.7804;-3.8561,.4004,3.1589;4.8409,-.5591,.9876;4.4735,-1.9081,.9151;3.7955,-2.5148,1.9657;3.5029,-1.758,3.096;3.9169,-.4355,3.2273;4.5929,.1572,2.1658;4.6503,-2.4606,-.0083;3.447,-3.5454,1.8901;2.6262,-2.3333,4.1209;3.6683,.125,4.1292;4.889,1.2078,2.2298;-.8255,.9024,-4.1588;-1.912,.0395,-4.2166;-1.7152,-1.2456,-4.7092;-.4735,-1.6719,-5.1691;.6057,-.8005,-5.0962;-.9553,1.9001,-3.732;-2.8998,.3415,-3.867;-2.8432,-2.183,-4.7287;-.362,-2.6843,-5.5578;1.59,-1.138,-5.4236;2.209,-1.5941,4.9916;2.3265,-3.5051,4.0233;-2.7294,-3.1948,-5.3933;-3.8293,-1.8936,-4.0805;7.1647,1.0241,-1.6087;6.2175,1.4474,-2.5864;8.552,1.2168,-1.8528;8.9914,1.7795,-3.0259;9.2678,.8949,-1.09;10.0615,1.916,-3.2053;6.7068,2.0061,-3.8002;8.0548,2.1671,-4.0139;5.9945,2.2988,-4.5749;8.4071,2.5912,-4.9584;3.6311,3.2137,-3.5096;2.5364,3.6641,-4.3049;4.5394,4.19,-3.0108;4.4043,5.5186,-3.3362;5.3543,3.8779,-2.3558;5.118,6.2469,-2.9406;2.4314,5.0432,-4.6363;3.3486,5.9532,-4.1724;1.5945,5.3687,-5.2621;3.2573,7.0116,-4.432;-4.4028,-2.5244,-.4547;-4.2686,-3.2842,-1.2425;-4.9655,-2.9685,.3827;-5.0357,-1.7314,-.8951;-2.0872,-1.6154,-1.1109;-2.295,-.6087,-1.5137;-1.0298,-1.6239,-.8028;-2.1783,-2.3132,-1.9533;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648536877741</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010622279562 0.000755775347 0.029987173963 0.005336891385</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021764167 -0.001994348 0.000111349 0.000140561 0.000192062 0.000220779 0.000286853 0.000331031 0.000505723 0.000554537 0.000672860 0.000741539 0.000762694 0.000791822 0.000838917 0.000942859 0.001018517 0.001088737 0.001124293 0.001215525 0.001259013 0.001341563 0.001440704 0.001608340 0.001663212 0.001971053 0.002076604 0.002195191 0.002213947 0.002375531 0.002641892 0.002993464 0.003286141 0.003755798 0.003836273 0.004023578 0.004398781 0.005052832 0.005401330 0.005497471 0.005835909 0.006099644 0.006481169 0.007174484 0.007589612 0.007859798 0.008198281 0.008829306 0.009340897 0.009868543 0.011038133 0.011598505 0.012744923 0.012903950 0.013245283 0.013701718 0.014194259 0.014876763 0.015180317 0.015414893 0.015998769 0.016257998 0.016639563 0.017164898 0.017617431 0.017965906 0.018778713 0.019306114 0.020721563 0.020844071 0.021872548 0.022777619 0.023979474 0.025341817 0.025856840 0.026351365 0.026789880 0.028272975 0.028785337 0.030658035 0.031370270 0.031692124 0.032244784 0.033348444 0.033746729 0.036850137 0.037296833 0.038905750 0.039185282 0.040753255 0.041475682 0.043665028 0.045094096 0.048242712 0.049062381 0.049443217 0.049983349 0.050965232 0.051012640 0.052108781 0.052332586 0.052392454 0.052538668 0.053392958 0.054035575 0.054636697 0.055079770 0.055832153 0.056363038 0.056457242 0.057036480 0.057728286 0.058457360 0.059528549 0.060599188 0.060829154 0.061220935 0.061772595 0.062259190 0.064891203 0.065640265 0.065747036 0.066287942 0.071322762 0.073730560 0.074403981 0.076790180 0.078868772 0.083542787 0.084329355 0.085025269 0.086200882 0.086893606 0.089596027 0.090482491 0.092081032 0.094430495 0.094676291 0.095555523 0.095828372 0.096164557 0.097373908 0.098209194 0.098903566 0.099335440 0.099916772 0.100545775 0.101441061 0.102221323 0.102988452 0.103727540 0.104374612 0.105999184 0.106115176 0.106642314 0.108427217 0.109596154 0.110488873 0.112251219 0.113031091 0.116328927 0.118127224 0.118465629 0.120952495 0.123169306 0.123396002 0.125599495 0.126500084 0.130397442 0.131555680 0.134758323 0.141541523 0.142301724 0.144801449 0.145758142 0.146403778 0.146728612 0.147053518 0.152423124 0.155230913 0.159441929 0.170614877 0.172539361 0.174969510 0.181862652 0.182642885 0.185924503 0.186594444 0.190610030 0.192520334 0.196013290 0.197604436 0.200046629 0.204697254 0.205585203 0.206733032 0.209382674 0.209613600 0.211970824 0.214675196 0.217597182 0.223856802 0.224657513 0.229001783 0.233431845 0.234060798 0.234796657 0.243007313 0.252871921 0.256487933 0.256665108 0.262763682 0.278096459 0.282222676 0.285972779 0.287052004 0.291253281 0.298512446 0.302080455 0.302924797 0.305129602 0.311952714 0.314469788 0.320603336 0.321412376 0.327465101 0.342811488 0.345662051 0.348929161 0.349396529 0.350210133 0.354273618 0.360743203 0.361459608 0.369755003 0.381164188 0.404642846 0.421681186 0.424458644 0.450430298 0.463624692 0.468596357 0.473384560 0.474653803 0.475645522 0.481461585 0.485685078 0.505157661 0.531003470 0.561062178 0.564900166 0.571913267 0.589944321 0.592094658 0.602394548 0.635345421 0.639047148 0.642285151 0.662128544 0.668900469 0.680356849 0.683651283 0.691224037 0.694103790 0.703808981 0.704760784 0.712150806 0.737929957 0.749892472 0.759262674 0.771831374 0.776577117 0.804064954 0.808659350 0.810857010 0.813145206 0.819491655 0.820438016 0.828659205 0.829749152 0.831175371 0.839415110 0.844138809 0.844898846 0.849376300 0.856934577 0.861394693 0.864563234 0.869821952 0.871316787 0.883138915 0.887374683 0.890907282 0.892495324 0.915809964 0.921889488 0.930255684 0.932043911 0.963532539 0.975094369 0.976671830 0.991201384 0.999288215 1.022697894 1.034249717 1.043472444 1.050965219 1.057925893 1.083758912 1.085395599 1.088422598 1.104694629 1.106578977 1.112036010 1.122551922 1.123465099 1.134952929 1.138926276 1.167327418 1.170535948 1.178727254 1.185437790 1.194048265 1.202729492 1.219846466 1.239962994 1.284366901 1.295418156 1.313041360 1.323386422 1.325239970 1.326429141 1.332843432 1.340310713 1.340617844 1.341695116 1.355417145 1.374673665 1.379383594 1.380932617 1.381461536 1.417982659 1.550964449 1.659887806 1.688045784</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">23</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37749563" y3="0.13215756" z3="-0.21914913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44215815" y3="0.0879732" z3="0.33551198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.7089278" y3="0.39656344" z3="-0.41584275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81587843" y3="1.26605788" z3="-2.33286142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43808916" y3="0.55485146" z3="-1.20532759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75632605" y3="0.95428433" z3="-3.66467414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.74500325" y3="1.81154503" z3="-3.21620918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.52774458" y3="2.74025911" z3="-4.6972031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59726866" y3="1.40839263" z3="-4.3626181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.66250803" y3="3.11325699" z3="-5.25406224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86700769" y3="-0.37347167" z3="-3.38739914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12573454" y3="0.26804067" z3="-0.98297567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38540944" y3="-0.91024325" z3="-1.90291962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92092006" y3="-0.7665292" z3="-1.69341331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09582371" y3="-2.2277195" z3="-1.71958725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.07600361" y3="-3.72345944" z3="0.72308822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.28839414" y3="-5.14705777" z3="-4.73457772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.01508862" y3="-4.94738884" z3="-3.6945183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.68815326" y3="-4.41232921" z3="-1.06624455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.98418152" y3="-4.48019675" z3="-2.8086915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.29556777" y3="-5.1726187" z3="-3.26852293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.64767929" y3="-4.90487861" z3="-1.94733013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.6444154" y3="-4.22316031" z3="-1.47810727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01083348" y3="-4.29303768" z3="-3.13175574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.04997225" y3="-5.53735919" z3="-3.9684557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.67974492" y3="-5.05654735" z3="-1.62143388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.93763507" y3="-4.014842" z3="0.26042599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.10343314" y3="-3.85598629" z3="0.87538684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.95964717" y3="-4.35800393" z3="0.4224872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13386916" y3="-3.70922168" z3="2.34005575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25057102" y3="-3.50036884" z3="5.13320517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31582185" y3="-4.01971135" z3="3.02815539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01222036" y3="-3.29221204" z3="3.07304179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0675415" y3="-3.18928637" z3="4.45975343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37217281" y3="-3.91909266" z3="4.41557615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.19575468" y3="-4.3498344" z3="2.46885809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0672312" y3="-3.05601894" z3="2.57789757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1718121" y3="-2.88146953" z3="5.00669364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29700286" y3="-4.17396982" z3="4.94033379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.29308981" y3="-3.42740398" z3="6.22354401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.50534462" y3="-3.797239" z3="-0.54564022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.23386123" y3="-3.22220769" z3="-0.97443108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.45130605" y3="0.48584102" z3="-4.57834011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06485806" y3="-1.96806766" z3="-0.01915438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01333355" y3="-1.23787713" z3="1.16588552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00946268" y3="-0.54542849" z3="1.5902504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.64316575" y3="0.49920655" z3="1.32171187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.83150842" y3="1.42719189" z3="-0.28160677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.85009109" y3="-0.59352657" z3="1.47068498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.77094309" y3="1.64466987" z3="2.79846991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.04545966" y3="-1.30590101" z3="1.99499168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.94791946" y3="-0.68918475" z3="3.26875478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.44247412" y3="0.81974419" z3="-1.11709088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.22465759" y3="2.35008788" z3="-0.22403221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.87938675" y3="1.72189673" z3="-0.46908278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94318149" y3="-0.93548646" z3="2.51490119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.76258693" y3="-0.0325866" z3="1.20158841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80212865" y3="-1.45743915" z3="0.78819592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.77412144" y3="1.07383743" z3="3.7439554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.09388937" y3="2.33240494" z3="2.82375203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.68719749" y3="2.26046365" z3="2.75982065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.09042927" y3="-1.08381304" z3="3.83662464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.88459703" y3="-0.93549152" z3="3.78640735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.85161583" y3="0.40408209" z3="3.16478261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84074145" y3="-0.56026212" z3="0.98830119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4728391" y3="-1.90916048" z3="0.91527874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79531918" y3="-2.51614416" z3="1.96601141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50369048" y3="-1.75987865" z3="3.09692225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.9180869" y3="-0.4375945" z3="3.22869483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59369248" y3="0.15545728" z3="2.16711672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.64876562" y3="-2.46118667" z3="-0.0086073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44642622" y3="-3.54664322" z3="1.89000945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62721487" y3="-2.33551518" z3="4.12191628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.67024672" y3="0.12251451" z3="4.13098958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89018636" y3="1.20588688" z3="2.23148262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8253378" y3="0.88976644" z3="-4.16023644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.90895765" y3="0.02289688" z3="-4.2247221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.70753562" y3="-1.25847271" z3="-4.72816227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.46360186" y3="-1.67777005" z3="-5.18746499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.61271516" y3="-0.80278977" z3="-5.10698197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.95849407" y3="1.88459626" z3="-3.72641542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.89746936" y3="0.31847596" z3="-3.87065532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.82946857" y3="-2.20140701" z3="-4.74587722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.34869463" y3="-2.68781997" z3="-5.57930508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.59872512" y3="-1.13507891" z3="-5.43408735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.21048845" y3="-1.59651854" z3="4.99301459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32727897" y3="-3.50711862" z3="4.02394812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.7103183" y3="-3.20858008" z3="-5.40186867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.81386904" y3="-1.92358567" z3="-4.0844271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16338136" y3="1.02587919" z3="-1.60713027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.21589999" y3="1.44867342" z3="-2.58484616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.55053021" y3="1.21991624" z3="-1.85097179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.98957378" y3="1.78349949" z3="-3.0238208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26650375" y3="0.89828233" z3="-1.08829922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.05956711" y3="1.92097053" z3="-3.20306842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.7048929" y3="2.00841435" z3="-3.79831045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0527336" y3="2.1706512" z3="-4.01173235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99235697" y3="2.30077006" z3="-4.57294205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.40474992" y3="2.59549902" z3="-4.9560548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.62735772" y3="3.21268928" z3="-3.50733232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.53187453" y3="3.6622773" z3="-4.30211257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.53454404" y3="4.18973621" z3="-3.00809904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.39775576" y3="5.51841343" z3="-3.33253198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.35007249" y3="3.87818109" z3="-2.35360106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.11065436" y3="6.24733494" z3="-2.93663191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.42505301" y3="5.04154993" z3="-4.63246197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.34125469" y3="5.95234812" z3="-4.16810882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.58768826" y3="5.36639406" z3="-5.25783154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.24863182" y3="7.01080417" z3="-4.42700107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.40513198" y3="-2.51732775" z3="-0.4504991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.27316733" y3="-3.2751913" z3="-1.24058882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.96674488" y3="-2.96298304" z3="0.38688663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0380545" y3="-1.72262264" z3="-0.887658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.09008283" y3="-1.60802894" z3="-1.10914967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29641502" y3="-0.59868091" z3="-1.50609363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0318467" y3="-1.62043925" z3="-0.80385974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.18518366" y3="-2.3015521" z3="-1.95459643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3775,.1322,-.2191;7.4422,.088,.3355;6.7089,.3966,-.4158;4.8159,1.2661,-2.3329;4.4381,.5549,-1.2053;2.7563,.9543,-3.6647;3.745,1.8115,-3.2162;1.5277,2.7403,-4.6972;1.5973,1.4084,-4.3626;.6625,3.1133,-5.2541;2.867,-.3735,-3.3874;3.1257,.268,-.983;2.3854,-.9102,-1.9029;.9209,-.7665,-1.6934;3.0958,-2.2277,-1.7196;-.076,-3.7235,.7231;.2884,-5.1471,-4.7346;.0151,-4.9474,-3.6945;-.6882,-4.4123,-1.0662;.9842,-4.4802,-2.8087;-1.2956,-5.1726,-3.2685;-1.6477,-4.9049,-1.9473;.6444,-4.2232,-1.4781;2.0108,-4.293,-3.1318;-2.05,-5.5374,-3.9685;-2.6797,-5.0565,-1.6214;-.9376,-4.0148,.2604;-2.1034,-3.856,.8754;-2.9596,-4.358,.4225;-2.1339,-3.7092,2.3401;-2.2506,-3.5004,5.1332;-3.3158,-4.0197,3.0282;-1.0122,-3.2922,3.073;-1.0675,-3.1893,4.4598;-3.3722,-3.9191,4.4156;-4.1958,-4.3498,2.4689;-.0672,-3.056,2.5779;-.1718,-2.8815,5.0067;-4.297,-4.174,4.9403;-2.2931,-3.4274,6.2235;1.5053,-3.7972,-.5456;2.2339,-3.2222,-.9744;.4513,.4858,-4.5783;-3.0649,-1.9681,-.0192;-3.0133,-1.2379,1.1659;-2.0095,-.5454,1.5903;-.6432,.4992,1.3217;-.8315,1.4272,-.2816;.8501,-.5935,1.4707;-.7709,1.6447,2.7985;-4.0455,-1.3059,1.995;-3.9479,-.6892,3.2688;-.4425,.8197,-1.1171;-.2247,2.3501,-.224;-1.8794,1.7219,-.4691;.9432,-.9355,2.5149;1.7626,-.0326,1.2016;.8021,-1.4574,.7882;-.7741,1.0738,3.744;.0939,2.3324,2.8238;-1.6872,2.2605,2.7598;-3.0904,-1.0838,3.8366;-4.8846,-.9355,3.7864;-3.8516,.4041,3.1648;4.8407,-.5603,.9883;4.4728,-1.9092,.9153;3.7953,-2.5161,1.966;3.5037,-1.7599,3.0969;3.9181,-.4376,3.2287;4.5937,.1555,2.1671;4.6488,-2.4612,-.0086;3.4464,-3.5466,1.89;2.6272,-2.3355,4.1219;3.6702,.1225,4.131;4.8902,1.2059,2.2315;-.8253,.8898,-4.1602;-1.909,.0229,-4.2247;-1.7075,-1.2585,-4.7282;-.4636,-1.6778,-5.1875;.6127,-.8028,-5.107;-.9585,1.8846,-3.7264;-2.8975,.3185,-3.8707;-2.8295,-2.2014,-4.7459;-.3487,-2.6878,-5.5793;1.5987,-1.1351,-5.4341;2.2105,-1.5965,4.993;2.3273,-3.5071,4.0239;-2.7103,-3.2086,-5.4019;-3.8139,-1.9236,-4.0844;7.1634,1.0259,-1.6071;6.2159,1.4487,-2.5848;8.5505,1.2199,-1.851;8.9896,1.7835,-3.0238;9.2665,.8983,-1.0883;10.0596,1.921,-3.2031;6.7049,2.0084,-3.7983;8.0527,2.1707,-4.0117;5.9924,2.3008,-4.5729;8.4047,2.5955,-4.9561;3.6274,3.2127,-3.5073;2.5319,3.6623,-4.3021;4.5345,4.1897,-3.0081;4.3978,5.5184,-3.3325;5.3501,3.8782,-2.3536;5.1107,6.2473,-2.9366;2.4251,5.0415,-4.6325;3.3413,5.9523,-4.1681;1.5877,5.3664,-5.2578;3.2486,7.0108,-4.427;-4.4051,-2.5173,-.4505;-4.2732,-3.2752,-1.2406;-4.9667,-2.963,.3869;-5.0381,-1.7226,-.8877;-2.0901,-1.608,-1.1091;-2.2964,-.5987,-1.5061;-1.0318,-1.6204,-.8039;-2.1852,-2.3016,-1.9546;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648578065679</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.015574649347 0.000980586613 0.036097304263 0.005338090659</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.021899508 -0.003337456 0.000112239 0.000140619 0.000192183 0.000220804 0.000286944 0.000331104 0.000505818 0.000555837 0.000672868 0.000744007 0.000763638 0.000795773 0.000838981 0.000943409 0.001018886 0.001088796 0.001124292 0.001221638 0.001259062 0.001341613 0.001441785 0.001610703 0.001664420 0.001973645 0.002081329 0.002205906 0.002226160 0.002377561 0.002642335 0.002994294 0.003286138 0.003758969 0.003836296 0.004024919 0.004408620 0.005053663 0.005422766 0.005566448 0.005846729 0.006100078 0.006484823 0.007187884 0.007589588 0.007930109 0.008261568 0.008831290 0.009348341 0.009868699 0.011039009 0.011605286 0.012745322 0.012905333 0.013249881 0.013713203 0.014192094 0.014876674 0.015188609 0.015417429 0.016002831 0.016256185 0.016653818 0.017288153 0.017622337 0.018030867 0.018783412 0.019401662 0.020723944 0.020850927 0.021933152 0.022791661 0.024005241 0.025322281 0.025856653 0.026350575 0.026797510 0.028273182 0.028785290 0.030668435 0.031383252 0.031788807 0.032519081 0.033348561 0.033747448 0.036895356 0.037302211 0.038914061 0.039185757 0.040756429 0.041546760 0.043667388 0.045097514 0.048249031 0.049062459 0.049444886 0.049983501 0.050968297 0.051027103 0.052109456 0.052332591 0.052392476 0.052539353 0.053393022 0.054035901 0.054636782 0.055079770 0.055837980 0.056363109 0.056457470 0.057036510 0.057728820 0.058465905 0.059528563 0.060599468 0.060829770 0.061223860 0.061773046 0.062259526 0.064891683 0.065643568 0.065746981 0.066307961 0.071363018 0.073736528 0.074451602 0.076792809 0.079014918 0.083552462 0.084430499 0.085026519 0.086207540 0.086914384 0.089604943 0.090494219 0.092155062 0.094439599 0.094687323 0.095555544 0.095828937 0.096247780 0.097373908 0.098209265 0.098924803 0.099337117 0.099917320 0.100585132 0.101444603 0.102234320 0.102991575 0.103727485 0.104374613 0.106008360 0.106139012 0.106642778 0.108427414 0.109598341 0.110512259 0.112251302 0.113031148 0.116329766 0.118139281 0.118466272 0.120952081 0.123195104 0.123396226 0.125602185 0.126548954 0.130397389 0.131555714 0.134758319 0.141551312 0.142301933 0.144804203 0.145760412 0.146424621 0.146750933 0.147054492 0.152426332 0.155230811 0.159441842 0.170759703 0.172539446 0.175010246 0.181932402 0.182643286 0.185924421 0.186594365 0.190616075 0.192520072 0.196063468 0.197607251 0.200046435 0.204698538 0.205585304 0.206736111 0.209598639 0.209652896 0.211975479 0.214674829 0.217615694 0.223856803 0.224657602 0.229064815 0.233442229 0.234077013 0.234796733 0.243033756 0.252886714 0.256490904 0.256703990 0.262835383 0.278101272 0.282222700 0.285972865 0.287098036 0.291355668 0.298549877 0.302137942 0.302931508 0.305129811 0.312011077 0.314476352 0.320716735 0.321412442 0.327592412 0.342815442 0.345780916 0.348929420 0.350203965 0.351131978 0.354278155 0.360744191 0.361460853 0.369755044 0.381205615 0.404685606 0.421682338 0.424459115 0.450430346 0.463623902 0.468596416 0.473384373 0.474652765 0.475645497 0.481872619 0.485685270 0.505228618 0.531052598 0.561133375 0.564941307 0.572170616 0.589944519 0.592095355 0.602404655 0.635345502 0.639047125 0.642299973 0.662128541 0.668927616 0.680356947 0.683651293 0.691224060 0.694104998 0.703808985 0.704813957 0.712173970 0.737934748 0.749892473 0.759262680 0.771831463 0.776577279 0.804064946 0.808659368 0.810857035 0.813145202 0.819496012 0.820438675 0.828661701 0.829760585 0.831176912 0.839415078 0.844138789 0.844899189 0.849376301 0.856934930 0.861395802 0.864563588 0.869830241 0.871399570 0.883140430 0.887374690 0.890907544 0.892506277 0.915810285 0.921889589 0.930255944 0.932044203 0.963532869 0.975094375 0.976687883 0.991206677 0.999288597 1.022698471 1.034254143 1.043476651 1.050965703 1.057926037 1.083764765 1.085396188 1.088426970 1.104694632 1.106580008 1.112036019 1.122551956 1.123465103 1.134953077 1.138926283 1.167328508 1.170536289 1.178727541 1.185440004 1.194048301 1.202751717 1.219847941 1.239963211 1.284489584 1.295432180 1.313054494 1.323413942 1.325242016 1.326430106 1.332843997 1.340310138 1.340614732 1.341695195 1.355417403 1.374673666 1.379643754 1.380932600 1.381757291 1.417989272 1.550965084 1.659889143 1.695638888</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">24</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37668625" y3="0.13167862" z3="-0.21839818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44127169" y3="0.08957577" z3="0.33671584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70788272" y3="0.39759152" z3="-0.41472028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81432783" y3="1.26584082" z3="-2.33171879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43702855" y3="0.55360205" z3="-1.20467833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75587527" y3="0.95220332" z3="-3.6646269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.74306538" y3="1.81054545" z3="-3.21504428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.52477348" y3="2.73718185" z3="-4.69600294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59685585" y3="1.40494596" z3="-4.36342326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.6590049" y3="3.10931612" z3="-5.25262574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86776683" y3="-0.37557368" z3="-3.38760463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1249466" y3="0.26527523" z3="-0.98276114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38525297" y3="-0.91273773" z3="-1.90359566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92068024" y3="-0.76940961" z3="-1.69456704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09546078" y3="-2.23043014" z3="-1.72006918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.07749171" y3="-3.72030766" z3="0.7212901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.28154942" y3="-5.14400971" z3="-4.73636021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.00895117" y3="-4.9433285" z3="-3.69630639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.69234083" y3="-4.40690579" z3="-1.06817493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.97945252" y3="-4.47896637" z3="-2.8107216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.30244844" y3="-5.16480484" z3="-3.27030808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.65367592" y3="-4.89603297" z3="-1.94922532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.64060933" y3="-4.2212082" z3="-1.47993422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00662826" y3="-4.29492007" z3="-3.1338153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.05779154" y3="-5.52737737" z3="-3.97020711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.68619972" y3="-5.04454035" z3="-1.62343971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.94009446" y3="-4.01029568" z3="0.2592902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.10352046" y3="-3.85502692" z3="0.87722834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.96225165" y3="-4.35169211" z3="0.42215852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1341315" y3="-3.70707724" z3="2.34077862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24938077" y3="-3.50075837" z3="5.13377726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31644354" y3="-4.01656679" z3="3.0288703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0117664" y3="-3.29158033" z3="3.07339825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06636871" y3="-3.18996845" z3="4.46011503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37190578" y3="-3.91741117" z3="4.41636826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.19700241" y3="-4.34506857" z3="2.46962962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06694145" y3="-3.05583467" z3="2.57777985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.17008489" y3="-2.88364145" z3="5.00690909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29667725" y3="-4.1719512" z3="4.9413757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.29116638" y3="-3.42911543" z3="6.22421782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.50284434" y3="-3.79849044" z3="-0.54747071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.23248122" y3="-3.2242094" z3="-0.97590863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.45401231" y3="0.47933382" z3="-4.58175378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06885271" y3="-1.95789158" z3="-0.01778697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01352008" y3="-1.23201223" z3="1.16849919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00795621" y3="-0.54068024" z3="1.5928707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.63989257" y3="0.50009078" z3="1.32343107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.82487148" y3="1.42956888" z3="-0.27957815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.85121166" y3="-0.59601924" z3="1.47064089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.76350624" y3="1.64555197" z3="2.80062785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.04443852" y3="-1.30068433" z3="2.00004851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.94413094" y3="-0.68557562" z3="3.27407463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.43828663" y3="0.82095686" z3="-1.1153497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.21442343" y3="2.35007543" z3="-0.22187287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.87160916" y3="1.72839401" z3="-0.46686175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94408111" y3="-0.9393443" z3="2.51443005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.76483347" y3="-0.03685161" z3="1.20172446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80110082" y3="-1.45904333" z3="0.7871735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.76734922" y3="1.07429729" z3="3.74585779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.10274138" y3="2.33149231" z3="2.82560926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.67857946" y3="2.26316165" z3="2.76283605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.08611118" y3="-1.08134803" z3="3.84032347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.88018845" y3="-0.93167815" z3="3.79304758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.84718843" y3="0.40779424" z3="3.17139004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84047925" y3="-0.56128921" z3="0.98896083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47218123" y3="-1.91005908" z3="0.91545882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7952632" y3="-2.51741985" z3="1.96634448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50451485" y3="-1.76166801" z3="3.09783405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.91927989" y3="-0.43955319" z3="3.23001418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59440099" y3="0.1538639" z3="2.16832056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.64729279" y3="-2.46161409" z3="-0.00887376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44613293" y3="-3.54781719" z3="1.89010589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62839942" y3="-2.33756771" z3="4.12297384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.67209686" y3="0.12017355" z3="4.13272371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.8912027" y3="1.20418237" z3="2.23304201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82370549" y3="0.87648873" z3="-4.16112221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.90305148" y3="0.00521715" z3="-4.22490001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.69623017" y3="-1.27370053" z3="-4.72778573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.4522864" y3="-1.68511419" z3="-5.19582581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.61992284" y3="-0.80611567" z3="-5.11571141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.9609114" y3="1.86927851" z3="-3.72546151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.89289914" y3="0.29615439" z3="-3.8723212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.81717416" y3="-2.21965215" z3="-4.75605544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.33366128" y3="-2.69203672" z3="-5.59784451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.60686396" y3="-1.13235313" z3="-5.44729878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.21216454" y3="-1.59888958" z3="4.99454611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32818654" y3="-3.50909403" z3="4.02461972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.69995197" y3="-3.22046378" z3="-5.43796598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.8021399" y3="-1.94523795" z3="-4.10789458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.16193548" y3="1.02772719" z3="-1.6057207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.21418723" y3="1.45001847" z3="-2.58339023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.54893409" y3="1.22312536" z3="-1.84932628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.98759146" y3="1.78756474" z3="-3.02190834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26511599" y3="0.90183013" z3="-1.08670636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.05748207" y3="1.92604679" z3="-3.20099741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.70278802" y3="2.01077036" z3="-3.79654796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.05050703" y3="2.17430566" z3="-4.00975448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99005808" y3="2.3028133" z3="-4.57112419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.40225145" y3="2.59986867" z3="-4.95385686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.62350809" y3="3.21174255" z3="-3.5052282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.52727494" y3="3.66046713" z3="-4.29949499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.52956395" y3="4.18959714" z3="-3.00551834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.3910455" y3="5.5183279" z3="-3.32900793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.34569477" y3="3.87860477" z3="-2.35149785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.10319657" y3="6.24785462" z3="-2.93287558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.41855036" y3="5.03987586" z3="-4.62868091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.33374076" y3="5.95150929" z3="-4.16394998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.58067754" y3="5.36409918" z3="-5.2536903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.23975243" y3="7.0100161" z3="-4.42214042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.40864803" y3="-2.50902286" z3="-0.44675829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.27750839" y3="-3.26652247" z3="-1.23732123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.96852" y3="-2.9555825" z3="0.3913729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.04331865" y3="-1.71465205" z3="-0.88199783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.09377554" y3="-1.60064078" z3="-1.10787729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29781992" y3="-0.59037119" z3="-1.50345497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.03504067" y3="-1.61547497" z3="-0.80424292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.19171974" y3="-2.29304845" z3="-1.95380165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3767,.1317,-.2184;7.4413,.0896,.3367;6.7079,.3976,-.4147;4.8143,1.2658,-2.3317;4.437,.5536,-1.2047;2.7559,.9522,-3.6646;3.7431,1.8105,-3.215;1.5248,2.7372,-4.696;1.5969,1.4049,-4.3634;.659,3.1093,-5.2526;2.8678,-.3756,-3.3876;3.1249,.2653,-.9828;2.3853,-.9127,-1.9036;.9207,-.7694,-1.6946;3.0955,-2.2304,-1.7201;-.0775,-3.7203,.7213;.2815,-5.144,-4.7364;.009,-4.9433,-3.6963;-.6923,-4.4069,-1.0682;.9795,-4.479,-2.8107;-1.3024,-5.1648,-3.2703;-1.6537,-4.896,-1.9492;.6406,-4.2212,-1.4799;2.0066,-4.2949,-3.1338;-2.0578,-5.5274,-3.9702;-2.6862,-5.0445,-1.6234;-.9401,-4.0103,.2593;-2.1035,-3.855,.8772;-2.9623,-4.3517,.4222;-2.1341,-3.7071,2.3408;-2.2494,-3.5008,5.1338;-3.3164,-4.0166,3.0289;-1.0118,-3.2916,3.0734;-1.0664,-3.19,4.4601;-3.3719,-3.9174,4.4164;-4.197,-4.3451,2.4696;-.0669,-3.0558,2.5778;-.1701,-2.8836,5.0069;-4.2967,-4.172,4.9414;-2.2912,-3.4291,6.2242;1.5028,-3.7985,-.5475;2.2325,-3.2242,-.9759;.454,.4793,-4.5818;-3.0689,-1.9579,-.0178;-3.0135,-1.232,1.1685;-2.008,-.5407,1.5929;-.6399,.5001,1.3234;-.8249,1.4296,-.2796;.8512,-.596,1.4706;-.7635,1.6456,2.8006;-4.0444,-1.3007,2;-3.9441,-.6856,3.2741;-.4383,.821,-1.1153;-.2144,2.3501,-.2219;-1.8716,1.7284,-.4669;.9441,-.9393,2.5144;1.7648,-.0369,1.2017;.8011,-1.459,.7872;-.7673,1.0743,3.7459;.1027,2.3315,2.8256;-1.6786,2.2632,2.7628;-3.0861,-1.0813,3.8403;-4.8802,-.9317,3.793;-3.8472,.4078,3.1714;4.8405,-.5613,.989;4.4722,-1.9101,.9155;3.7953,-2.5174,1.9663;3.5045,-1.7617,3.0978;3.9193,-.4396,3.23;4.5944,.1539,2.1683;4.6473,-2.4616,-.0089;3.4461,-3.5478,1.8901;2.6284,-2.3376,4.123;3.6721,.1202,4.1327;4.8912,1.2042,2.233;-.8237,.8765,-4.1611;-1.9031,.0052,-4.2249;-1.6962,-1.2737,-4.7278;-.4523,-1.6851,-5.1958;.6199,-.8061,-5.1157;-.9609,1.8693,-3.7255;-2.8929,.2962,-3.8723;-2.8172,-2.2197,-4.7561;-.3337,-2.692,-5.5978;1.6069,-1.1324,-5.4473;2.2122,-1.5989,4.9945;2.3282,-3.5091,4.0246;-2.7,-3.2205,-5.438;-3.8021,-1.9452,-4.1079;7.1619,1.0277,-1.6057;6.2142,1.45,-2.5834;8.5489,1.2231,-1.8493;8.9876,1.7876,-3.0219;9.2651,.9018,-1.0867;10.0575,1.926,-3.201;6.7028,2.0108,-3.7965;8.0505,2.1743,-4.0098;5.9901,2.3028,-4.5711;8.4023,2.5999,-4.9539;3.6235,3.2117,-3.5052;2.5273,3.6605,-4.2995;4.5296,4.1896,-3.0055;4.391,5.5183,-3.329;5.3457,3.8786,-2.3515;5.1032,6.2479,-2.9329;2.4186,5.0399,-4.6287;3.3337,5.9515,-4.1639;1.5807,5.3641,-5.2537;3.2398,7.01,-4.4221;-4.4086,-2.509,-.4468;-4.2775,-3.2665,-1.2373;-4.9685,-2.9556,.3914;-5.0433,-1.7147,-.882;-2.0938,-1.6006,-1.1079;-2.2978,-.5904,-1.5035;-1.035,-1.6155,-.8042;-2.1917,-2.293,-1.9538;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648599525388</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.021295779118 0.001354051849 0.034853758288 0.005337180592</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.022222732 -0.005657495 0.000114377 0.000141385 0.000192202 0.000220874 0.000287137 0.000331148 0.000505840 0.000557244 0.000672897 0.000744043 0.000763786 0.000796771 0.000838982 0.000943410 0.001018931 0.001088798 0.001124299 0.001222701 0.001259065 0.001341641 0.001442154 0.001613195 0.001666128 0.001975404 0.002081790 0.002205953 0.002227984 0.002378118 0.002642242 0.002994235 0.003286152 0.003759381 0.003836253 0.004025206 0.004412783 0.005053067 0.005421924 0.005613721 0.005848967 0.006100401 0.006489206 0.007193723 0.007589735 0.007976648 0.008308290 0.008836020 0.009354866 0.009868790 0.011039301 0.011611838 0.012747939 0.012909417 0.013260511 0.013736309 0.014206020 0.014876706 0.015191145 0.015417343 0.016016929 0.016278506 0.016655154 0.017560451 0.017622014 0.018054765 0.018785001 0.019504709 0.020724708 0.020854654 0.021972830 0.022806441 0.024076801 0.025531574 0.025862509 0.026357811 0.026800751 0.028273666 0.028785493 0.030672801 0.031391052 0.031820166 0.032803074 0.033349471 0.033749576 0.036955048 0.037312237 0.038925140 0.039186183 0.040760774 0.041647628 0.043670860 0.045104232 0.048257630 0.049062488 0.049447433 0.049983691 0.050970453 0.051045765 0.052110703 0.052332605 0.052392518 0.052540566 0.053393513 0.054036129 0.054636974 0.055079773 0.055845836 0.056363222 0.056457910 0.057037153 0.057740065 0.058471236 0.059528539 0.060601712 0.060830747 0.061227870 0.061774878 0.062260046 0.064892898 0.065648282 0.065747856 0.066336828 0.071415606 0.073744943 0.074524585 0.076797588 0.079216927 0.083564473 0.084583619 0.085027814 0.086220222 0.086949003 0.089616985 0.090515548 0.092259221 0.094452584 0.094703769 0.095555523 0.095829954 0.096413475 0.097373961 0.098209276 0.098969877 0.099341176 0.099918599 0.100671789 0.101453011 0.102263648 0.102999554 0.103727497 0.104374611 0.106018350 0.106196343 0.106644008 0.108427457 0.109604160 0.110561676 0.112252318 0.113031310 0.116341347 0.118160510 0.118468389 0.120952097 0.123361557 0.123402161 0.125621977 0.126797143 0.130397586 0.131556329 0.134758429 0.141571262 0.142302331 0.144807289 0.145763417 0.146459468 0.146795229 0.147057016 0.152435520 0.155233524 0.159442151 0.171037392 0.172539701 0.175088739 0.182053867 0.182645867 0.185924679 0.186594344 0.190630936 0.192519869 0.196164379 0.197612168 0.200046468 0.204699911 0.205585471 0.206740987 0.209610265 0.210140565 0.211995294 0.214674833 0.217658101 0.223856803 0.224657632 0.229193041 0.233459867 0.234115567 0.234796797 0.243091820 0.252922559 0.256494525 0.256784447 0.262975667 0.278109862 0.282222739 0.285972907 0.287174489 0.291567605 0.298610786 0.302245687 0.302940221 0.305129872 0.312112620 0.314489148 0.320938120 0.321412439 0.327816060 0.342822925 0.345864116 0.348929443 0.350205623 0.354230218 0.355336534 0.360749754 0.361469801 0.369755066 0.381269013 0.404747900 0.421683224 0.424458997 0.450430539 0.463634460 0.468596519 0.473385073 0.474685564 0.475647119 0.482495652 0.485686865 0.505272146 0.531072044 0.561165156 0.564967203 0.572288479 0.589944495 0.592096411 0.602414129 0.635345741 0.639047485 0.642303426 0.662128579 0.668935229 0.680356942 0.683651310 0.691224128 0.694104852 0.703809081 0.704932536 0.712185277 0.737936298 0.749892506 0.759262689 0.771831490 0.776577299 0.804065049 0.808659762 0.810858270 0.813145199 0.819496788 0.820438978 0.828666150 0.829763664 0.831179441 0.839416197 0.844138774 0.844899533 0.849376385 0.856937069 0.861396158 0.864563622 0.869866267 0.871557652 0.883142400 0.887374740 0.890908615 0.892515209 0.915810577 0.921889617 0.930256064 0.932044183 0.963534559 0.975094416 0.976711724 0.991219796 0.999289438 1.022700166 1.034265892 1.043486201 1.050966630 1.057926250 1.083779864 1.085398370 1.088437523 1.104694624 1.106582684 1.112036029 1.122551991 1.123465117 1.134953337 1.138926403 1.167331537 1.170536517 1.178728124 1.185442506 1.194048370 1.202806329 1.219848539 1.239963241 1.284717852 1.295432577 1.313059772 1.323456716 1.325243842 1.326430511 1.332848498 1.340328625 1.340969952 1.341696193 1.355417633 1.374673671 1.379876447 1.380932594 1.382224076 1.417996695 1.550966866 1.659890678 1.709271036</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">25</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37590513" y3="0.13116995" z3="-0.21760452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.44040124" y3="0.09090314" z3="0.33794264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70688772" y3="0.39845674" z3="-0.41355959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81295257" y3="1.26567253" z3="-2.33053084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.4360417" y3="0.552527" z3="-1.20393903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7555335" y3="0.95035136" z3="-3.66433451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.7413957" y3="1.809662" z3="-3.21389693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.52204842" y3="2.73431354" z3="-4.69478052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59629652" y3="1.40202926" z3="-4.36334391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.65589039" y3="3.10546117" z3="-5.25146748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86868169" y3="-0.37733511" z3="-3.38768308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12418373" y3="0.26297096" z3="-0.98246464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38535756" y3="-0.91514984" z3="-1.90410195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9205931" y3="-0.77163426" z3="-1.69578413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09570396" y3="-2.23255316" z3="-1.7206365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.08058404" y3="-3.71635036" z3="0.71962545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.27473058" y3="-5.14104959" z3="-4.73837653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="0.00288853" y3="-4.93974802" z3="-3.69828562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.69690352" y3="-4.40144778" z3="-1.06950166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.97461799" y3="-4.4780083" z3="-2.81249467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.30886069" y3="-5.15777543" z3="-3.27202423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.65930276" y3="-4.88801829" z3="-1.95074985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.63658268" y3="-4.2196993" z3="-1.48175951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00224234" y3="-4.2966714" z3="-3.1357215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.06514924" y3="-5.51847053" z3="-3.97195217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.69217339" y3="-5.03388378" z3="-1.62488314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.94358049" y3="-4.00458683" z3="0.25767185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1090451" y3="-3.84368962" z3="0.87398892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.9654098" y3="-4.34642633" z3="0.4227922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13624415" y3="-3.70245229" z3="2.3399322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24838677" y3="-3.50125406" z3="5.13411711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31753767" y3="-4.0128494" z3="3.02911714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01256189" y3="-3.29034467" z3="3.07262034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06565876" y3="-3.19100343" z3="4.45976695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37173867" y3="-3.91593192" z3="4.41691863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.19889707" y3="-4.33996048" z3="2.47031957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06757742" y3="-3.05535255" z3="2.57691195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.16852534" y3="-2.88655967" z3="5.00634365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29632743" y3="-4.17049974" z3="4.94226384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.28925755" y3="-3.4310009" z3="6.22470071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.50027282" y3="-3.79964587" z3="-0.54906992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.23078995" y3="-3.22701131" z3="-0.97713063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.45613925" y3="0.47386614" z3="-4.5844581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06733916" y3="-1.9576424" z3="-0.0126434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01256054" y3="-1.22699542" z3="1.1727026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00777802" y3="-0.53492653" z3="1.5940569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.63501476" y3="0.50192847" z3="1.32477707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.81844523" y3="1.43181678" z3="-0.27785926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.85248123" y3="-0.59874995" z3="1.47056839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.7560792" y3="1.64642235" z3="2.80269353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.04239918" y3="-1.29487526" z3="2.00401666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.94052467" y3="-0.68143901" z3="3.27919659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.43428952" y3="0.82180413" z3="-1.11376555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.2044752" y3="2.34998508" z3="-0.22026658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.86412543" y3="1.73457583" z3="-0.46456465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94504942" y3="-0.9432376" z3="2.51394407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.76716603" y3="-0.04122458" z3="1.20176706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80010102" y3="-1.46081149" z3="0.78605841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.76044256" y3="1.07474162" z3="3.74765883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.111574" y3="2.33059123" z3="2.82750344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.66988499" y3="2.26595067" z3="2.7657301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.08199363" y3="-1.07899936" z3="3.84345243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.8760756" y3="-0.92783642" z3="3.79878954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.84284138" y3="0.41189225" z3="3.17760398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84017574" y3="-0.56239103" z3="0.98961567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47147212" y3="-1.91102695" z3="0.91562066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79510708" y3="-2.51877894" z3="1.96664834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50523471" y3="-1.76353064" z3="3.09869753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92036013" y3="-0.44156437" z3="3.23129881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59500699" y3="0.15222054" z3="2.16950528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.64575198" y3="-2.46213956" z3="-0.00914101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44569042" y3="-3.54906522" z3="1.89011924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.62947152" y3="-2.33970227" z3="4.12401766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.67386032" y3="0.11775679" z3="4.13445126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89215764" y3="1.20242378" z3="2.23459025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82266472" y3="0.86463908" z3="-4.16113498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89973995" y3="-0.01004188" z3="-4.23202125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.68932105" y3="-1.28477156" z3="-4.7496924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.44261774" y3="-1.69068756" z3="-5.21270117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.627215" y3="-0.80871953" z3="-5.12416525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.96274379" y3="1.85508311" z3="-3.7200988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.89025871" y3="0.27459667" z3="-3.87444232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.80482302" y3="-2.23517944" z3="-4.78251451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.32135176" y3="-2.69535011" z3="-5.61445909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.61530639" y3="-1.13010356" z3="-5.45576389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.21362079" y3="-1.60118654" z3="4.99595166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32912472" y3="-3.51113433" z3="4.02541169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.6807979" y3="-3.22837777" z3="-5.45915723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.78881415" y3="-1.98009171" z3="-4.10255931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1606087" y3="1.02942358" z3="-1.60424569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.21264629" y3="1.45128642" z3="-2.58187784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.54746313" y3="1.22610801" z3="-1.84761178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.98576329" y3="1.79139339" z3="-3.01992318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.2638371" y3="0.90509659" z3="-1.08505542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.05555384" y3="1.930824" z3="-3.19885257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.70087221" y3="2.01301676" z3="-3.79472573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.04847163" y3="2.177779" z3="-4.00771303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98796121" y3="2.30476098" z3="-4.56925284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.39996134" y3="2.60402322" z3="-4.95160119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.61998681" y3="3.21085473" z3="-3.50323986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.52311876" y3="3.65870702" z3="-4.29715731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.52485756" y3="4.18948794" z3="-3.00292632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.38460616" y3="5.51827747" z3="-3.32541792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.34151528" y3="3.87901528" z3="-2.34931911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.09597411" y3="6.24839644" z3="-2.92896694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.41247911" y3="5.03825247" z3="-4.62510117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.3265527" y3="5.9507239" z3="-4.15977905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.57408825" y3="5.3619032" z3="-5.24971185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.23115646" y3="7.00930981" z3="-4.41714433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.41055256" y3="-2.50258533" z3="-0.44140031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.28247268" y3="-3.25875312" z3="-1.23371132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.97056639" y3="-2.94930168" z3="0.39639302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.04349488" y3="-1.7055347" z3="-0.87436703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.09679826" y3="-1.59499549" z3="-1.10587871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30333848" y3="-0.5840852" z3="-1.49843391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.03725915" y3="-1.61042567" z3="-0.8052873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.19726891" y3="-2.2851595" z3="-1.95372548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3759,.1312,-.2176;7.4404,.0909,.3379;6.7069,.3985,-.4136;4.813,1.2657,-2.3305;4.436,.5525,-1.2039;2.7555,.9504,-3.6643;3.7414,1.8097,-3.2139;1.522,2.7343,-4.6948;1.5963,1.402,-4.3633;.6559,3.1055,-5.2515;2.8687,-.3773,-3.3877;3.1242,.263,-.9825;2.3854,-.9151,-1.9041;.9206,-.7716,-1.6958;3.0957,-2.2326,-1.7206;-.0806,-3.7164,.7196;.2747,-5.141,-4.7384;.0029,-4.9397,-3.6983;-.6969,-4.4014,-1.0695;.9746,-4.478,-2.8125;-1.3089,-5.1578,-3.272;-1.6593,-4.888,-1.9507;.6366,-4.2197,-1.4818;2.0022,-4.2967,-3.1357;-2.0651,-5.5185,-3.972;-2.6922,-5.0339,-1.6249;-.9436,-4.0046,.2577;-2.109,-3.8437,.874;-2.9654,-4.3464,.4228;-2.1362,-3.7025,2.3399;-2.2484,-3.5013,5.1341;-3.3175,-4.0128,3.0291;-1.0126,-3.2903,3.0726;-1.0657,-3.191,4.4598;-3.3717,-3.9159,4.4169;-4.1989,-4.34,2.4703;-.0676,-3.0554,2.5769;-.1685,-2.8866,5.0063;-4.2963,-4.1705,4.9423;-2.2893,-3.431,6.2247;1.5003,-3.7996,-.5491;2.2308,-3.227,-.9771;.4561,.4739,-4.5845;-3.0673,-1.9576,-.0126;-3.0126,-1.227,1.1727;-2.0078,-.5349,1.5941;-.635,.5019,1.3248;-.8184,1.4318,-.2779;.8525,-.5987,1.4706;-.7561,1.6464,2.8027;-4.0424,-1.2949,2.004;-3.9405,-.6814,3.2792;-.4343,.8218,-1.1138;-.2045,2.35,-.2203;-1.8641,1.7346,-.4646;.945,-.9432,2.5139;1.7672,-.0412,1.2018;.8001,-1.4608,.7861;-.7604,1.0747,3.7477;.1116,2.3306,2.8275;-1.6699,2.266,2.7657;-3.082,-1.079,3.8435;-4.8761,-.9278,3.7988;-3.8428,.4119,3.1776;4.8402,-.5624,.9896;4.4715,-1.911,.9156;3.7951,-2.5188,1.9666;3.5052,-1.7635,3.0987;3.9204,-.4416,3.2313;4.595,.1522,2.1695;4.6458,-2.4621,-.0091;3.4457,-3.5491,1.8901;2.6295,-2.3397,4.124;3.6739,.1178,4.1345;4.8922,1.2024,2.2346;-.8227,.8646,-4.1611;-1.8997,-.01,-4.232;-1.6893,-1.2848,-4.7497;-.4426,-1.6907,-5.2127;.6272,-.8087,-5.1242;-.9627,1.8551,-3.7201;-2.8903,.2746,-3.8744;-2.8048,-2.2352,-4.7825;-.3214,-2.6954,-5.6145;1.6153,-1.1301,-5.4558;2.2136,-1.6012,4.996;2.3291,-3.5111,4.0254;-2.6808,-3.2284,-5.4592;-3.7888,-1.9801,-4.1026;7.1606,1.0294,-1.6042;6.2126,1.4513,-2.5819;8.5475,1.2261,-1.8476;8.9858,1.7914,-3.0199;9.2638,.9051,-1.0851;10.0556,1.9308,-3.1989;6.7009,2.013,-3.7947;8.0485,2.1778,-4.0077;5.988,2.3048,-4.5693;8.4,2.604,-4.9516;3.62,3.2109,-3.5032;2.5231,3.6587,-4.2972;4.5249,4.1895,-3.0029;4.3846,5.5183,-3.3254;5.3415,3.879,-2.3493;5.096,6.2484,-2.929;2.4125,5.0383,-4.6251;3.3266,5.9507,-4.1598;1.5741,5.3619,-5.2497;3.2312,7.0093,-4.4171;-4.4106,-2.5026,-.4414;-4.2825,-3.2588,-1.2337;-4.9706,-2.9493,.3964;-5.0435,-1.7055,-.8744;-2.0968,-1.595,-1.1059;-2.3033,-.5841,-1.4984;-1.0373,-1.6104,-.8053;-2.1973,-2.2852,-1.9537;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648625270718</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.024156074705 0.001625542690 0.028561955336 0.005337628503</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.023349711 -0.006932548 0.000114886 0.000141383 0.000192948 0.000220974 0.000287183 0.000331280 0.000506126 0.000557237 0.000673574 0.000745778 0.000764561 0.000798213 0.000838989 0.000943602 0.001019483 0.001088817 0.001124286 0.001222694 0.001259093 0.001341642 0.001442432 0.001613969 0.001666555 0.001975411 0.002081830 0.002206553 0.002228321 0.002378143 0.002642263 0.002994634 0.003286209 0.003759790 0.003836237 0.004025528 0.004412704 0.005053665 0.005421829 0.005618750 0.005849665 0.006100456 0.006489809 0.007194371 0.007591237 0.007985794 0.008310378 0.008840631 0.009356475 0.009869070 0.011039529 0.011613352 0.012749763 0.012913075 0.013267137 0.013746827 0.014242462 0.014876667 0.015191157 0.015419619 0.016023134 0.016343503 0.016655879 0.017619986 0.017821556 0.018052315 0.018823880 0.019533154 0.020724724 0.020854319 0.021970057 0.022807652 0.024108571 0.025845453 0.026284659 0.026648621 0.026801311 0.028274400 0.028787113 0.030672380 0.031393318 0.031819795 0.032850343 0.033349682 0.033750597 0.036980622 0.037317657 0.038930148 0.039186528 0.040762925 0.041702266 0.043674053 0.045110570 0.048262517 0.049062488 0.049448973 0.049983765 0.050970954 0.051050749 0.052112000 0.052332618 0.052392552 0.052541588 0.053393676 0.054036408 0.054637150 0.055079872 0.055849873 0.056363315 0.056458366 0.057038426 0.057773120 0.058470859 0.059529208 0.060606918 0.060830703 0.061234832 0.061775464 0.062260587 0.064894261 0.065649894 0.065751438 0.066361771 0.071450584 0.073751580 0.074584234 0.076802290 0.079360679 0.083569741 0.084701413 0.085029074 0.086234148 0.086981006 0.089625233 0.090540800 0.092328808 0.094463488 0.094718043 0.095555518 0.095830793 0.096582009 0.097374064 0.098209288 0.099019969 0.099347565 0.099920086 0.100783108 0.101465532 0.102309222 0.103011241 0.103727499 0.104374626 0.106024031 0.106283984 0.106647061 0.108427444 0.109610191 0.110621705 0.112253695 0.113031965 0.116363790 0.118174148 0.118473412 0.120952552 0.123394469 0.123666833 0.125650682 0.127347814 0.130397824 0.131557529 0.134758450 0.141593337 0.142303621 0.144814736 0.145768623 0.146494036 0.146882490 0.147068181 0.152448176 0.155240142 0.159442136 0.171378051 0.172540028 0.175201696 0.182204431 0.182652595 0.185924845 0.186594187 0.190648017 0.192519629 0.196295353 0.197619488 0.200046428 0.204701322 0.205585509 0.206745739 0.209610792 0.210760359 0.212056153 0.214674542 0.217728437 0.223856856 0.224657871 0.229370333 0.233485862 0.234173996 0.234797871 0.243166585 0.252958325 0.256496316 0.256875084 0.263182738 0.278119622 0.282222871 0.285972995 0.287271742 0.291820521 0.298691100 0.302366639 0.302958168 0.305130176 0.312244374 0.314505931 0.321175888 0.321412750 0.328098111 0.342826067 0.345914766 0.348929504 0.350205964 0.354262734 0.360697612 0.361357092 0.362909055 0.369755156 0.381413131 0.404845771 0.421683790 0.424460333 0.450430944 0.463674792 0.468596502 0.473397346 0.474767084 0.475651831 0.483215505 0.485689587 0.505284362 0.531071649 0.561166282 0.564973284 0.572289024 0.589944448 0.592098840 0.602418354 0.635345662 0.639047447 0.642304206 0.662128776 0.668935513 0.680356967 0.683651407 0.691224453 0.694108066 0.703809382 0.705135275 0.712185408 0.737936275 0.749892716 0.759262670 0.771831489 0.776577363 0.804065195 0.808660341 0.810858764 0.813145197 0.819497582 0.820439960 0.828685158 0.829763682 0.831185434 0.839419260 0.844138771 0.844899708 0.849376624 0.856944008 0.861397531 0.864563734 0.869936768 0.871788249 0.883146614 0.887374734 0.890909444 0.892519551 0.915810759 0.921889616 0.930256905 0.932044187 0.963541509 0.975094585 0.976745046 0.991243144 0.999290901 1.022703366 1.034288448 1.043505324 1.050967472 1.057926352 1.083803843 1.085401447 1.088454934 1.104694636 1.106586321 1.112036035 1.122551989 1.123465119 1.134954169 1.138927519 1.167340355 1.170536525 1.178729285 1.185445025 1.194048479 1.202905718 1.219848528 1.239964901 1.286972541 1.295443518 1.313059646 1.323497612 1.325245318 1.326430594 1.332861058 1.340338432 1.341690819 1.342850069 1.355421886 1.374673669 1.380026659 1.380932615 1.382744668 1.418009880 1.550969908 1.659891817 1.728245477</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">26</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37526068" y3="0.13065879" z3="-0.2167698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43968178" y3="0.09238035" z3="0.33919269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70601179" y3="0.39943727" z3="-0.41235927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81154711" y3="1.26555157" z3="-2.32923263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43513942" y3="0.55127599" z3="-1.2031767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75508267" y3="0.94844478" z3="-3.66375666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.73957391" y3="1.80880601" z3="-3.21249159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.51903252" y3="2.73135989" z3="-4.69297077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59562147" y3="1.39880208" z3="-4.36312284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.65250795" y3="3.10145533" z3="-5.24978425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.86987989" y3="-0.37938898" z3="-3.3876099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12357626" y3="0.26007149" z3="-0.98209082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38518398" y3="-0.91747801" z3="-1.90467755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92032604" y3="-0.77448984" z3="-1.69747722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09488508" y3="-2.23552689" z3="-1.72078397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.0808628" y3="-3.7149114" z3="0.71798658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.26762492" y3="-5.13776665" z3="-4.74013495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.00332846" y3="-4.93590724" z3="-3.69988367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.70062102" y3="-4.39761794" z3="-1.07158831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.9698604" y3="-4.4767107" z3="-2.81474326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.31577741" y3="-5.15102017" z3="-3.27354954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.66511929" y3="-4.88095902" z3="-1.95238253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.63297402" y3="-4.21803055" z3="-1.48352578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9978058" y3="-4.297869" z3="-3.13820626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.07325368" y3="-5.50893044" z3="-3.97366964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.69824418" y3="-5.02422739" z3="-1.626344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.9452664" y3="-4.00200068" z3="0.25707327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1050465" y3="-3.85122328" z3="0.87964675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.96772787" y3="-4.33954437" z3="0.4217102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13522179" y3="-3.70239946" z3="2.34178158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24723067" y3="-3.50150211" z3="5.13482018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31798767" y3="-4.01006937" z3="3.03014261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01124266" y3="-3.29046936" z3="3.07381059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06425352" y3="-3.19157081" z3="4.46062261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3716124" y3="-3.91390101" z3="4.41784435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.19988413" y3="-4.33530196" z3="2.47112624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06661478" y3="-3.05584175" z3="2.57736478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.16678195" y3="-2.88836482" z3="5.00710879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29629504" y3="-4.16766329" z3="4.94337692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.28752921" y3="-3.4324641" z3="6.22546941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.49775207" y3="-3.80100149" z3="-0.55111907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.22941092" y3="-3.22834664" z3="-0.97888026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.45855313" y3="0.46776059" z3="-4.58854603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07588745" y3="-1.93976866" z3="-0.01477454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01342931" y3="-1.22059158" z3="1.17364794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00473383" y3="-0.53153667" z3="1.59755561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.63305486" y3="0.50196495" z3="1.32678133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.81218306" y3="1.43391413" z3="-0.27569691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.85371985" y3="-0.60070762" z3="1.47048325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.74837721" y3="1.64737043" z3="2.80486274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.04186886" y3="-1.28985644" z3="2.00973239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.93618707" y3="-0.67782124" z3="3.28439564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.43035297" y3="0.82291778" z3="-1.11189384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.19476487" y3="2.34974736" z3="-0.21795419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.85674288" y3="1.74054371" z3="-0.46242032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94609994" y3="-0.94682073" z3="2.51338195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.76949818" y3="-0.04490729" z3="1.20201133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79938729" y3="-1.46189417" z3="0.78504182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.75333913" y3="1.07541348" z3="3.74967144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.12088343" y3="2.3295152" z3="2.82897105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.66089595" y3="2.26888887" z3="2.76903143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.07730242" y3="-1.07610654" z3="3.84753487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.87113714" y3="-0.92326588" z3="3.80587274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.83769573" y3="0.41570486" z3="3.18419501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84003648" y3="-0.56348178" z3="0.99032308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47094084" y3="-1.91199289" z3="0.91580288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7951574" y3="-2.52013849" z3="1.96694003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50610989" y3="-1.76544214" z3="3.09957997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92157199" y3="-0.44364993" z3="3.23261902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59577096" y3="0.15052928" z3="2.1707487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.6444434" y3="-2.46260657" z3="-0.00941173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44556472" y3="-3.55034023" z3="1.89019463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63071285" y3="-2.3419259" z3="4.12499707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.67564045" y3="0.11528964" z3="4.13615434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89314394" y3="1.20064135" z3="2.2361992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82196776" y3="0.85159278" z3="-4.16437801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89512573" y3="-0.02715955" z3="-4.23790007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.67928993" y3="-1.29931639" z3="-4.75439898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.43209982" y3="-1.69704772" z3="-5.22559897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.63412195" y3="-0.81146577" z3="-5.13464371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.96586831" y3="1.83894839" z3="-3.71669099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.886452" y3="0.25268785" z3="-3.88004102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.79140545" y3="-2.25378286" z3="-4.78578151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.3062826" y3="-2.6993756" z3="-5.6366154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.62404824" y3="-1.12766055" z3="-5.46642906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.21557444" y3="-1.60391506" z3="4.99761882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32988064" y3="-3.51326257" z3="4.02576998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.6689178" y3="-3.24364906" z3="-5.47887302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.77412768" y3="-1.99581094" z3="-4.13112126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.15932288" y3="1.03129466" z3="-1.60272705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.21107961" y3="1.4527394" z3="-2.58026393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.54602444" y3="1.22932276" z3="-1.84589271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.98391508" y3="1.79550637" z3="-3.01792643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26262544" y3="0.90860355" z3="-1.08342642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.05359953" y3="1.93593595" z3="-3.19672109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.6988907" y3="2.01552036" z3="-3.79280026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.04636441" y3="2.18154726" z3="-4.00561195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98576752" y3="2.30699695" z3="-4.56723685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.39756425" y3="2.60852993" z3="-4.94927825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.61627553" y3="3.21003809" z3="-3.50095036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.51863163" y3="3.65696734" z3="-4.29433663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.51995743" y3="4.189507" z3="-3.00015799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.37782652" y3="5.51835464" z3="-3.32162485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.33719444" y3="3.87964959" z3="-2.34697533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.08828329" y3="6.2491551" z3="-2.92478632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.40607837" y3="5.03658472" z3="-4.62125782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.31899513" y3="5.94996302" z3="-4.15541851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.56717458" y3="5.35955862" z3="-5.245532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.22205759" y3="7.00862323" z3="-4.4119237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.41594007" y3="-2.49286812" z3="-0.43838592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.28751548" y3="-3.24982012" z3="-1.22991885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.97247402" y3="-2.94013154" z3="0.40171056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05280324" y3="-1.69852465" z3="-0.87037123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.10186959" y3="-1.58636203" z3="-1.10659603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30297219" y3="-0.57376509" z3="-1.49895891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.04190602" y3="-1.60576453" z3="-0.8060806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.2056919" y3="-2.27637064" z3="-1.95428477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3753,.1307,-.2168;7.4397,.0924,.3392;6.706,.3994,-.4124;4.8115,1.2656,-2.3292;4.4351,.5513,-1.2032;2.7551,.9484,-3.6638;3.7396,1.8088,-3.2125;1.519,2.7314,-4.693;1.5956,1.3988,-4.3631;.6525,3.1015,-5.2498;2.8699,-.3794,-3.3876;3.1236,.2601,-.9821;2.3852,-.9175,-1.9047;.9203,-.7745,-1.6975;3.0949,-2.2355,-1.7208;-.0809,-3.7149,.718;.2676,-5.1378,-4.7401;-.0033,-4.9359,-3.6999;-.7006,-4.3976,-1.0716;.9699,-4.4767,-2.8147;-1.3158,-5.151,-3.2735;-1.6651,-4.881,-1.9524;.633,-4.218,-1.4835;1.9978,-4.2979,-3.1382;-2.0733,-5.5089,-3.9737;-2.6982,-5.0242,-1.6263;-.9453,-4.002,.2571;-2.105,-3.8512,.8796;-2.9677,-4.3395,.4217;-2.1352,-3.7024,2.3418;-2.2472,-3.5015,5.1348;-3.318,-4.0101,3.0301;-1.0112,-3.2905,3.0738;-1.0643,-3.1916,4.4606;-3.3716,-3.9139,4.4178;-4.1999,-4.3353,2.4711;-.0666,-3.0558,2.5774;-.1668,-2.8884,5.0071;-4.2963,-4.1677,4.9434;-2.2875,-3.4325,6.2255;1.4978,-3.801,-.5511;2.2294,-3.2283,-.9789;.4586,.4678,-4.5885;-3.0759,-1.9398,-.0148;-3.0134,-1.2206,1.1736;-2.0047,-.5315,1.5976;-.6331,.502,1.3268;-.8122,1.4339,-.2757;.8537,-.6007,1.4705;-.7484,1.6474,2.8049;-4.0419,-1.2899,2.0097;-3.9362,-.6778,3.2844;-.4304,.8229,-1.1119;-.1948,2.3497,-.218;-1.8567,1.7405,-.4624;.9461,-.9468,2.5134;1.7695,-.0449,1.202;.7994,-1.4619,.785;-.7533,1.0754,3.7497;.1209,2.3295,2.829;-1.6609,2.2689,2.769;-3.0773,-1.0761,3.8475;-4.8711,-.9233,3.8059;-3.8377,.4157,3.1842;4.84,-.5635,.9903;4.4709,-1.912,.9158;3.7952,-2.5201,1.9669;3.5061,-1.7654,3.0996;3.9216,-.4436,3.2326;4.5958,.1505,2.1707;4.6444,-2.4626,-.0094;3.4456,-3.5503,1.8902;2.6307,-2.3419,4.125;3.6756,.1153,4.1362;4.8931,1.2006,2.2362;-.822,.8516,-4.1644;-1.8951,-.0272,-4.2379;-1.6793,-1.2993,-4.7544;-.4321,-1.697,-5.2256;.6341,-.8115,-5.1346;-.9659,1.8389,-3.7167;-2.8865,.2527,-3.88;-2.7914,-2.2538,-4.7858;-.3063,-2.6994,-5.6366;1.624,-1.1277,-5.4664;2.2156,-1.6039,4.9976;2.3299,-3.5133,4.0258;-2.6689,-3.2436,-5.4789;-3.7741,-1.9958,-4.1311;7.1593,1.0313,-1.6027;6.2111,1.4527,-2.5803;8.546,1.2293,-1.8459;8.9839,1.7955,-3.0179;9.2626,.9086,-1.0834;10.0536,1.9359,-3.1967;6.6989,2.0155,-3.7928;8.0464,2.1815,-4.0056;5.9858,2.307,-4.5672;8.3976,2.6085,-4.9493;3.6163,3.21,-3.501;2.5186,3.657,-4.2943;4.52,4.1895,-3.0002;4.3778,5.5184,-3.3216;5.3372,3.8796,-2.347;5.0883,6.2492,-2.9248;2.4061,5.0366,-4.6213;3.319,5.95,-4.1554;1.5672,5.3596,-5.2455;3.2221,7.0086,-4.4119;-4.4159,-2.4929,-.4384;-4.2875,-3.2498,-1.2299;-4.9725,-2.9401,.4017;-5.0528,-1.6985,-.8704;-2.1019,-1.5864,-1.1066;-2.303,-.5738,-1.499;-1.0419,-1.6058,-.8061;-2.2057,-2.2764,-1.9543;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648708532217</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.020733257011 0.001478487230 0.034067109029 0.005337090882</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.026197528 -0.004465778 0.000116162 0.000141845 0.000193014 0.000221036 0.000287203 0.000331294 0.000506127 0.000557492 0.000673562 0.000745695 0.000765089 0.000798394 0.000839216 0.000943646 0.001019462 0.001088820 0.001124270 0.001223231 0.001259138 0.001341824 0.001442415 0.001614488 0.001667648 0.001975733 0.002081944 0.002206933 0.002228800 0.002378445 0.002642354 0.002994619 0.003286216 0.003759672 0.003836295 0.004025631 0.004412685 0.005053664 0.005422353 0.005621403 0.005850076 0.006100605 0.006491651 0.007194544 0.007591353 0.007987318 0.008312029 0.008841145 0.009357076 0.009868916 0.011039410 0.011613663 0.012750360 0.012917149 0.013269527 0.013747627 0.014259926 0.014876593 0.015191928 0.015421385 0.016023568 0.016380313 0.016655857 0.017620112 0.017907360 0.018080913 0.018874216 0.019534180 0.020725080 0.020855824 0.021977573 0.022808193 0.024109348 0.025849156 0.026324686 0.026800986 0.027708278 0.028276763 0.028793867 0.030675100 0.031394446 0.031827234 0.032854601 0.033350034 0.033750477 0.036980442 0.037317145 0.038929870 0.039186513 0.040763290 0.041703006 0.043676939 0.045112008 0.048262931 0.049062484 0.049449041 0.049983764 0.050971274 0.051050527 0.052113454 0.052332633 0.052392564 0.052544589 0.053394061 0.054037120 0.054638075 0.055081836 0.055849978 0.056363426 0.056458617 0.057039550 0.057820431 0.058473211 0.059532033 0.060612498 0.060830760 0.061240773 0.061775457 0.062260557 0.064894883 0.065650046 0.065756141 0.066366833 0.071458041 0.073757502 0.074602756 0.076813091 0.079396588 0.083569760 0.084734212 0.085028970 0.086238968 0.086991935 0.089626968 0.090552489 0.092343489 0.094467357 0.094722906 0.095555594 0.095831141 0.096642380 0.097374193 0.098209292 0.099032924 0.099350523 0.099920762 0.100851632 0.101473914 0.102349805 0.103017413 0.103727470 0.104374601 0.106024626 0.106337470 0.106650215 0.108427948 0.109615095 0.110656769 0.112256090 0.113032606 0.116383666 0.118177257 0.118484910 0.120953779 0.123395749 0.123884452 0.125669238 0.127937124 0.130397770 0.131558137 0.134758895 0.141608372 0.142305226 0.144821272 0.145771824 0.146511100 0.146939229 0.147086289 0.152460185 0.155249881 0.159442214 0.171606981 0.172540222 0.175291333 0.182298756 0.182661513 0.185924973 0.186594085 0.190657687 0.192519866 0.196387797 0.197625412 0.200046277 0.204702134 0.205585515 0.206748329 0.209610887 0.211112509 0.212160458 0.214675139 0.217792950 0.223857488 0.224658573 0.229499504 0.233512777 0.234218697 0.234804632 0.243214549 0.252971891 0.256496452 0.256916561 0.263351943 0.278124781 0.282222994 0.285973061 0.287349138 0.291960789 0.298753209 0.302443583 0.302969550 0.305130526 0.312346008 0.314518917 0.321280040 0.321414205 0.328302346 0.342827269 0.345959594 0.348929544 0.350206980 0.354266133 0.360725971 0.361433400 0.369753831 0.370195471 0.381829265 0.404990692 0.421684116 0.424469942 0.450432334 0.463704151 0.468596594 0.473417423 0.474817535 0.475655474 0.483611325 0.485693967 0.505284156 0.531076341 0.561172709 0.564973421 0.572328255 0.589944459 0.592105861 0.602418163 0.635346009 0.639047444 0.642317085 0.662129460 0.668957059 0.680357076 0.683651555 0.691225424 0.694121765 0.703809752 0.705306482 0.712190851 0.737939920 0.749893037 0.759262666 0.771831518 0.776577901 0.804065604 0.808661768 0.810860058 0.813145195 0.819503409 0.820442283 0.828741952 0.829768583 0.831210819 0.839430522 0.844138746 0.844899944 0.849377154 0.856969804 0.861404864 0.864564252 0.869995325 0.871953060 0.883156480 0.887374744 0.890914185 0.892520093 0.915811008 0.921889633 0.930261822 0.932044287 0.963571625 0.975094738 0.976770964 0.991255491 0.999292114 1.022705127 1.034306222 1.043534464 1.050967920 1.057928320 1.083817309 1.085402656 1.088465782 1.104695971 1.106587349 1.112036035 1.122552173 1.123465177 1.134958363 1.138932933 1.167361663 1.170536729 1.178731227 1.185448372 1.194048619 1.203026000 1.219848520 1.239967938 1.290998076 1.295532387 1.313063914 1.323516719 1.325247418 1.326431101 1.332875995 1.340339994 1.341692833 1.346003042 1.355431129 1.374673665 1.380087574 1.380932643 1.383042394 1.418057229 1.550972642 1.659892455 1.745015834</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">27</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37447098" y3="0.13020135" z3="-0.21595682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43882658" y3="0.09367763" z3="0.34041953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70501481" y3="0.40031373" z3="-0.41117526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81013229" y3="1.26545433" z3="-2.32802314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43412683" y3="0.55030686" z3="-1.20240555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75465849" y3="0.94667085" z3="-3.66379035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.73777391" y3="1.80800088" z3="-3.2113027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.51643888" y3="2.72869555" z3="-4.69200737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59528331" y3="1.39586857" z3="-4.36400899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.64951943" y3="3.09804983" z3="-5.24868918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87035082" y3="-0.38096418" z3="-3.38792618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1227614" y3="0.25809072" z3="-0.98180972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38510487" y3="-0.91960624" z3="-1.90526278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92008448" y3="-0.7755896" z3="-1.69852377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09500877" y3="-2.23708333" z3="-1.7214114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.08521354" y3="-3.71088074" z3="0.7163611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.26082878" y3="-5.13530355" z3="-4.74221351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.00940408" y3="-4.93307358" z3="-3.7019158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.70561249" y3="-4.39218334" z3="-1.07251365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.96492457" y3="-4.47637973" z3="-2.81628734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.32198601" y3="-5.14487882" z3="-3.27510641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.6706838" y3="-4.87353841" z3="-1.95367037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.62870899" y3="-4.21707675" z3="-1.48537127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.99327793" y3="-4.29993843" z3="-3.13997401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.08036971" y3="-5.5011108" z3="-3.9750551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.70418003" y3="-5.01449574" z3="-1.62765103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.94960818" y3="-3.99579738" z3="0.25507649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.11501481" y3="-3.83208296" z3="0.87227769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.97111292" y3="-4.33579746" z3="0.42343485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13868057" y3="-3.69612087" z3="2.33973285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.246311" y3="-3.50187424" z3="5.13497423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31937331" y3="-4.00589659" z3="3.03008505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01281544" y3="-3.28915072" z3="3.07214184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06373025" y3="-3.19301572" z3="4.45971647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37148677" y3="-3.91231697" z3="4.41824881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.20223944" y3="-4.32983137" z3="2.47182167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06767715" y3="-3.05577882" z3="2.57594571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.16514926" y3="-2.89203839" z3="5.00592636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29595541" y3="-4.16610339" z3="4.94419504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.28560167" y3="-3.43403052" z3="6.22577878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.49500751" y3="-3.80227929" z3="-0.552538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.22729502" y3="-3.23175636" z3="-0.97986507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.46091413" y3="0.46240828" z3="-4.59190245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0700888" y3="-1.9477554" z3="-0.00620747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.0116732" y3="-1.21637319" z3="1.17916959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00562828" y3="-0.52517898" z3="1.59701926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.62667954" y3="0.50462862" z3="1.32753933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.8059886" y3="1.43619153" z3="-0.2743285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.85533936" y3="-0.60351726" z3="1.47034559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.74092463" y3="1.64804052" z3="2.80664448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.03893938" y3="-1.28373285" z3="2.01294442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.9322237" y3="-0.67316354" z3="3.28929318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.42627509" y3="0.82389588" z3="-1.11062416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.18564199" y3="2.35003887" z3="-0.2167779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.84966391" y3="1.7461412" z3="-0.46021711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94725463" y3="-0.9505914" z3="2.51286164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.77204779" y3="-0.04902781" z3="1.20211174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.7989962" y3="-1.46365397" z3="0.78376025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.74618824" y3="1.07566271" z3="3.75118103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.12975277" y3="2.32838689" z3="2.83057948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.65205235" y3="2.27160865" z3="2.77165876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.07269177" y3="-1.07387389" z3="3.84989675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.86663159" y3="-0.91902485" z3="3.81109973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.83262429" y3="0.42013152" z3="3.18966085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83975983" y3="-0.56456902" z3="0.99098858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.47032934" y3="-1.91295557" z3="0.91595453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79509253" y3="-2.5215438" z3="1.96721912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50686936" y3="-1.76736638" z3="3.10041172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92263682" y3="-0.4456946" z3="3.23390661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59635685" y3="0.14888952" z3="2.17195838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.64303535" y3="-2.46312635" z3="-0.0096817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44522035" y3="-3.5516357" z3="1.89011595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6317904" y3="-2.34415373" z3="4.12598277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.67736202" y3="0.1128057" z3="4.13790553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89407876" y3="1.19888999" z3="2.23780085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82046281" y3="0.84047312" z3="-4.16554045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89060892" y3="-0.04155425" z3="-4.24148098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.67021632" y3="-1.31038709" z3="-4.76605058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.42167589" y3="-1.70248074" z3="-5.23769141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.64132534" y3="-0.81387886" z3="-5.14288565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.96750721" y3="1.82595252" z3="-3.71777075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.88359223" y3="0.23284787" z3="-3.88393884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.77883476" y3="-2.26943945" z3="-4.80845436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.29326265" y3="-2.70185201" z3="-5.65323174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.63204333" y3="-1.12475662" z3="-5.47810747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.21693714" y3="-1.6062442" z3="4.99890617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3308831" y3="-3.51535866" z3="4.02654435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.65132438" y3="-3.25197744" z3="-5.50602932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.76260016" y3="-2.02987805" z3="-4.12713512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.15799622" y3="1.03302961" z3="-1.60121006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.20952942" y3="1.45408771" z3="-2.57870618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.54457107" y3="1.23230812" z3="-1.84409624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.9821537" y3="1.79936454" z3="-3.01582543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26135159" y3="0.91181369" z3="-1.0817014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.05174869" y3="1.94069433" z3="-3.1944477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.69703991" y3="2.01791369" z3="-3.7908706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.04441008" y3="2.18513384" z3="-4.00343146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98377372" y3="2.30916936" z3="-4.56526043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.39538946" y3="2.61282835" z3="-4.94685649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.61266944" y3="3.20926797" z3="-3.49876382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.51442511" y3="3.65541087" z3="-4.29179239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.5151815" y3="4.18951848" z3="-2.9973451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.37133997" y3="5.51841703" z3="-3.31781176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.33299193" y3="3.88018494" z3="-2.34462298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.08100805" y3="6.2497968" z3="-2.92064453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.39999179" y3="5.03516083" z3="-4.61747567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.31181016" y3="5.94933412" z3="-4.15107513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.56067128" y3="5.35748318" z3="-5.24151651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.21355333" y3="7.00802488" z3="-4.40687196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.41677875" y3="-2.48795954" z3="-0.43179215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.29314114" y3="-3.24327208" z3="-1.22573987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.97499107" y3="-2.93468803" z3="0.40704861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.04991351" y3="-1.6887178" z3="-0.86087366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.10481951" y3="-1.5822226" z3="-1.10361627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31107288" y3="-0.56904727" z3="-1.49073081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.04364884" y3="-1.6018497" z3="-0.8086933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.2119949" y3="-2.26812253" z3="-1.95440232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3745,.1302,-.216;7.4388,.0937,.3404;6.705,.4003,-.4112;4.8101,1.2655,-2.328;4.4341,.5503,-1.2024;2.7547,.9467,-3.6638;3.7378,1.808,-3.2113;1.5164,2.7287,-4.692;1.5953,1.3959,-4.364;.6495,3.098,-5.2487;2.8704,-.381,-3.3879;3.1228,.2581,-.9818;2.3851,-.9196,-1.9053;.9201,-.7756,-1.6985;3.095,-2.2371,-1.7214;-.0852,-3.7109,.7164;.2608,-5.1353,-4.7422;-.0094,-4.9331,-3.7019;-.7056,-4.3922,-1.0725;.9649,-4.4764,-2.8163;-1.322,-5.1449,-3.2751;-1.6707,-4.8735,-1.9537;.6287,-4.2171,-1.4854;1.9933,-4.2999,-3.14;-2.0804,-5.5011,-3.9751;-2.7042,-5.0145,-1.6277;-.9496,-3.9958,.2551;-2.115,-3.8321,.8723;-2.9711,-4.3358,.4234;-2.1387,-3.6961,2.3397;-2.2463,-3.5019,5.135;-3.3194,-4.0059,3.0301;-1.0128,-3.2892,3.0721;-1.0637,-3.193,4.4597;-3.3715,-3.9123,4.4182;-4.2022,-4.3298,2.4718;-.0677,-3.0558,2.5759;-.1651,-2.892,5.0059;-4.296,-4.1661,4.9442;-2.2856,-3.434,6.2258;1.495,-3.8023,-.5525;2.2273,-3.2318,-.9799;.4609,.4624,-4.5919;-3.0701,-1.9478,-.0062;-3.0117,-1.2164,1.1792;-2.0056,-.5252,1.597;-.6267,.5046,1.3275;-.806,1.4362,-.2743;.8553,-.6035,1.4703;-.7409,1.648,2.8066;-4.0389,-1.2837,2.0129;-3.9322,-.6732,3.2893;-.4263,.8239,-1.1106;-.1856,2.35,-.2168;-1.8497,1.7461,-.4602;.9473,-.9506,2.5129;1.772,-.049,1.2021;.799,-1.4637,.7838;-.7462,1.0757,3.7512;.1298,2.3284,2.8306;-1.6521,2.2716,2.7717;-3.0727,-1.0739,3.8499;-4.8666,-.919,3.8111;-3.8326,.4201,3.1897;4.8398,-.5646,.991;4.4703,-1.913,.916;3.7951,-2.5215,1.9672;3.5069,-1.7674,3.1004;3.9226,-.4457,3.2339;4.5964,.1489,2.172;4.643,-2.4631,-.0097;3.4452,-3.5516,1.8901;2.6318,-2.3442,4.126;3.6774,.1128,4.1379;4.8941,1.1989,2.2378;-.8205,.8405,-4.1655;-1.8906,-.0416,-4.2415;-1.6702,-1.3104,-4.7661;-.4217,-1.7025,-5.2377;.6413,-.8139,-5.1429;-.9675,1.826,-3.7178;-2.8836,.2328,-3.8839;-2.7788,-2.2694,-4.8085;-.2933,-2.7019,-5.6532;1.632,-1.1248,-5.4781;2.2169,-1.6062,4.9989;2.3309,-3.5154,4.0265;-2.6513,-3.252,-5.506;-3.7626,-2.0299,-4.1271;7.158,1.033,-1.6012;6.2095,1.4541,-2.5787;8.5446,1.2323,-1.8441;8.9822,1.7994,-3.0158;9.2614,.9118,-1.0817;10.0517,1.9407,-3.1944;6.697,2.0179,-3.7909;8.0444,2.1851,-4.0034;5.9838,2.3092,-4.5653;8.3954,2.6128,-4.9469;3.6127,3.2093,-3.4988;2.5144,3.6554,-4.2918;4.5152,4.1895,-2.9973;4.3713,5.5184,-3.3178;5.333,3.8802,-2.3446;5.081,6.2498,-2.9206;2.4,5.0352,-4.6175;3.3118,5.9493,-4.1511;1.5607,5.3575,-5.2415;3.2136,7.008,-4.4069;-4.4168,-2.488,-.4318;-4.2931,-3.2433,-1.2257;-4.975,-2.9347,.407;-5.0499,-1.6887,-.8609;-2.1048,-1.5822,-1.1036;-2.3111,-.569,-1.4907;-1.0436,-1.6018,-.8087;-2.212,-2.2681,-1.9544;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648813869042</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010786406922 0.000937765257 0.023087764889 0.005337897301</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.028571713 -0.001866738 0.000116376 0.000141846 0.000194561 0.000221181 0.000287223 0.000331480 0.000507206 0.000557512 0.000673990 0.000747741 0.000765857 0.000801470 0.000839603 0.000944243 0.001019486 0.001088825 0.001124257 0.001223151 0.001259154 0.001341931 0.001442467 0.001616445 0.001669983 0.001976313 0.002082078 0.002207921 0.002228644 0.002378521 0.002642335 0.002995902 0.003286247 0.003759950 0.003836287 0.004025793 0.004412730 0.005054272 0.005422379 0.005628628 0.005850188 0.006100902 0.006499247 0.007194624 0.007593040 0.007993008 0.008313502 0.008843749 0.009358716 0.009868857 0.011039403 0.011613705 0.012751258 0.012922670 0.013271513 0.013747551 0.014270227 0.014876513 0.015192085 0.015421798 0.016023538 0.016399113 0.016657689 0.017620164 0.017928856 0.018108011 0.018907301 0.019534291 0.020725073 0.020857405 0.021985419 0.022809462 0.024109358 0.025850015 0.026327665 0.026801323 0.028264757 0.028482830 0.028823629 0.030683439 0.031394623 0.031854035 0.032981598 0.033355832 0.033751846 0.036985127 0.037323285 0.038932979 0.039186614 0.040763266 0.041711723 0.043681090 0.045111924 0.048263196 0.049062484 0.049449241 0.049983749 0.050971696 0.051061430 0.052115526 0.052332643 0.052392561 0.052552983 0.053395000 0.054039035 0.054640893 0.055090652 0.055850502 0.056363657 0.056458728 0.057040338 0.057881383 0.058483460 0.059538391 0.060616032 0.060831058 0.061243793 0.061775560 0.062260922 0.064895132 0.065650231 0.065762001 0.066366535 0.071457448 0.073763679 0.074601928 0.076837361 0.079393538 0.083570964 0.084731759 0.085030708 0.086238637 0.086991151 0.089626825 0.090552628 0.092342250 0.094467050 0.094722465 0.095555977 0.095831260 0.096643745 0.097374404 0.098209426 0.099031878 0.099350638 0.099920790 0.100868053 0.101475870 0.102366246 0.103017188 0.103727421 0.104374631 0.106025011 0.106337352 0.106649949 0.108430059 0.109619218 0.110663363 0.112259106 0.113032507 0.116403589 0.118178622 0.118502550 0.120959699 0.123398862 0.124019719 0.125683185 0.128442336 0.130397841 0.131557937 0.134762212 0.141617430 0.142306751 0.144823021 0.145772444 0.146517117 0.146958912 0.147100636 0.152464498 0.155254759 0.159442285 0.171665828 0.172540468 0.175315261 0.182320538 0.182666202 0.185925618 0.186594062 0.190662747 0.192519625 0.196411880 0.197625987 0.200046801 0.204702638 0.205586511 0.206748967 0.209610906 0.211201328 0.212201288 0.214674935 0.217811057 0.223858297 0.224658791 0.229535535 0.233529636 0.234226520 0.234818226 0.243228322 0.252973958 0.256496457 0.256926573 0.263402745 0.278126191 0.282223010 0.285974783 0.287376452 0.291985497 0.298772863 0.302475598 0.302968695 0.305130682 0.312379534 0.314523567 0.321293389 0.321415205 0.328365919 0.342828867 0.345982565 0.348930690 0.350207653 0.354267487 0.360725735 0.361437566 0.369755090 0.372990305 0.382211739 0.405057265 0.421684076 0.424492074 0.450435591 0.463709679 0.468596762 0.473424809 0.474826262 0.475656195 0.483607375 0.485699668 0.505293927 0.531096009 0.561207095 0.564989056 0.572495089 0.589945146 0.592119870 0.602422903 0.635351296 0.639047622 0.642336848 0.662130436 0.668998790 0.680357649 0.683651572 0.691227227 0.694138954 0.703809956 0.705328629 0.712214600 0.737948037 0.749893215 0.759262969 0.771831552 0.776578797 0.804066680 0.808665263 0.810865244 0.813145201 0.819511950 0.820445851 0.828842286 0.829777545 0.831276676 0.839464414 0.844138771 0.844901015 0.849378339 0.857037062 0.861417608 0.864564894 0.870012585 0.871969261 0.883171946 0.887374775 0.890933821 0.892520724 0.915812397 0.921889651 0.930271817 0.932045211 0.963643597 0.975098616 0.976778123 0.991255210 0.999292430 1.022705086 1.034308893 1.043561960 1.050978490 1.057943397 1.083817033 1.085402818 1.088465669 1.104703504 1.106587951 1.112036045 1.122552824 1.123465430 1.134969648 1.138942687 1.167387374 1.170537952 1.178733033 1.185451097 1.194048710 1.203102802 1.219848615 1.239970014 1.294267178 1.296218491 1.313080491 1.323517644 1.325250848 1.326432779 1.332891256 1.340340346 1.341693618 1.348928491 1.355441693 1.374673660 1.380094501 1.380932682 1.383072349 1.418166947 1.550973502 1.659892653 1.751307085</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">28</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3737447" y3="0.12985748" z3="-0.21510554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43800346" y3="0.09525708" z3="0.34170795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.704055" y3="0.40147507" z3="-0.40991736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80873921" y3="1.2656975" z3="-2.32661035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43317529" y3="0.54935694" z3="-1.20159499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75472781" y3="0.94489686" z3="-3.66361967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.73612829" y3="1.80741733" z3="-3.2099872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.51386777" y3="2.72566954" z3="-4.69098735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59532642" y3="1.39268401" z3="-4.36453494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.64654963" y3="3.09385245" z3="-5.24786123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87203196" y3="-0.38278018" z3="-3.38789712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12209319" y3="0.25555248" z3="-0.9814479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38486342" y3="-0.92155691" z3="-1.90593008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91974634" y3="-0.77748486" z3="-1.70051774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09377973" y3="-2.23977651" z3="-1.7215794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.08688294" y3="-3.70889396" z3="0.71489837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.25328656" y3="-5.13353849" z3="-4.74369719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.01614699" y3="-4.93033792" z3="-3.70336279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.71018112" y3="-4.38806643" z3="-1.07460526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.95948725" y3="-4.47584791" z3="-2.81835251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.3293354" y3="-5.1390546" z3="-3.27646172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.67712384" y3="-4.86662629" z3="-1.95525758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.62423054" y3="-4.21559039" z3="-1.48717686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98823327" y3="-4.30216294" z3="-3.14219076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.08862493" y3="-5.49341787" z3="-3.97635284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.71091049" y3="-5.00480618" z3="-1.62910187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.95245075" y3="-3.9919826" z3="0.25405797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.11285269" y3="-3.83605184" z3="0.87684822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.97514907" y3="-4.32808745" z3="0.4218342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13895643" y3="-3.69478832" z3="2.34092793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24525523" y3="-3.50229389" z3="5.1353228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32071443" y3="-4.00236406" z3="3.03088042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0125598" y3="-3.28870488" z3="3.07244394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06274509" y3="-3.19375498" z3="4.45979487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37171412" y3="-3.91012887" z3="4.41902091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.20435248" y3="-4.32426508" z3="2.47267803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06788916" y3="-3.05575847" z3="2.5753186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.16349007" y3="-2.89455013" z3="5.00563811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29608165" y3="-4.16335238" z3="4.94537213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.28351881" y3="-3.43602403" z3="6.22623287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.49155938" y3="-3.80347451" z3="-0.55462289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.22490776" y3="-3.23326207" z3="-0.98167896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.46420129" y3="0.45621678" z3="-4.59616597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07741198" y3="-1.93345901" z3="-0.00713712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01134367" y3="-1.21063084" z3="1.18072735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.00157761" y3="-0.5220113" z3="1.5997427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.62360271" y3="0.50471359" z3="1.32888227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.79954405" y3="1.43845797" z3="-0.27263474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8572752" y3="-0.60554066" z3="1.46981064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.73277929" y3="1.64868711" z3="2.8083894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.03714738" y3="-1.27800354" z3="2.0188625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.92638059" y3="-0.66862201" z3="3.29476204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.42249269" y3="0.82525044" z3="-1.10943142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.17584405" y3="2.35005095" z3="-0.21514464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.8422236" y3="1.75219623" z3="-0.45793607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.94872131" y3="-0.95417353" z3="2.51189677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.7751893" y3="-0.05286076" z3="1.20210065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79895129" y3="-1.46482622" z3="0.78234291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.73869438" y3="1.07580097" z3="3.7526298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.13942473" y3="2.32706826" z3="2.83192669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.64262278" y3="2.27418969" z3="2.77450954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.06672674" y3="-1.07048354" z3="3.85411379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.86033661" y3="-0.91306921" z3="3.8183897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.8255164" y3="0.42476084" z3="3.19609702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83958192" y3="-0.56563395" z3="0.99165367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46975642" y3="-1.9138903" z3="0.91598481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79523203" y3="-2.52299791" z3="1.96738098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50792899" y3="-1.76948941" z3="3.10126418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92404941" y3="-0.44800715" z3="3.23530327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59722216" y3="0.14708604" z3="2.17327897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.64156786" y3="-2.46346775" z3="-0.0101865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44518509" y3="-3.55300027" z3="1.88999708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63324805" y3="-2.34667552" z3="4.12693261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.67944425" y3="0.11000241" z3="4.13978142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89521943" y3="1.19697426" z3="2.23959222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81860563" y3="0.82742456" z3="-4.16794136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88514897" y3="-0.05919169" z3="-4.24879018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.66028099" y3="-1.32511137" z3="-4.77978483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.4101074" y3="-1.70992648" z3="-5.25201111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.64960483" y3="-0.81706656" z3="-5.15253262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97002862" y3="1.81036782" z3="-3.71266424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.87852801" y3="0.2097601" z3="-3.88745167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.76579138" y3="-2.28633098" z3="-4.82169167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.27808252" y3="-2.70710158" z3="-5.66919008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.64165066" y3="-1.12274681" z3="-5.48750833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.21886575" y3="-1.60922668" z3="5.00039369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33214045" y3="-3.51783684" z3="4.02699872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.63824029" y3="-3.26579452" z3="-5.52160192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.74728694" y3="-2.04723856" z3="-4.14981712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.15665281" y3="1.03520882" z3="-1.5995498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.20794098" y3="1.4559464" z3="-2.57692279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.54306443" y3="1.23586508" z3="-1.84219922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.98023461" y3="1.80396071" z3="-3.01358231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.26005567" y3="0.91557537" z3="-1.07992048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.04972003" y3="1.94631076" z3="-3.19204393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.69500976" y3="2.02098156" z3="-3.78870426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.04224564" y3="2.18950637" z3="-4.00105031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98152266" y3="2.31205839" z3="-4.56296489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.39293322" y3="2.61806534" z3="-4.94419354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.60888605" y3="3.20869934" z3="-3.49646033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.50998893" y3="3.65378485" z3="-4.28920205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.5098834" y3="4.1898701" z3="-2.99415824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.3639713" y3="5.51886079" z3="-3.31337187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.32821059" y3="3.88115681" z3="-2.34179425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.07259206" y3="6.25096051" z3="-2.915643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.3932836" y3="5.03370917" z3="-4.61338336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.30366112" y3="5.94890117" z3="-4.14607944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.55342411" y3="5.35536817" z3="-5.23705242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.20368968" y3="7.00771867" z3="-4.40080351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.42185" y3="-2.47968655" z3="-0.42712819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.29897231" y3="-3.23576959" z3="-1.22030445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.97739734" y3="-2.92615779" z3="0.41395256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0569768" y3="-1.68192676" z3="-0.85543576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.11052882" y3="-1.57483851" z3="-1.10430386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31230535" y3="-0.55912527" z3="-1.48845005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.04831732" y3="-1.59906168" z3="-0.81197565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.22367596" y3="-2.25880056" z3="-1.95596285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3737,.1299,-.2151;7.438,.0953,.3417;6.7041,.4015,-.4099;4.8087,1.2657,-2.3266;4.4332,.5494,-1.2016;2.7547,.9449,-3.6636;3.7361,1.8074,-3.21;1.5139,2.7257,-4.691;1.5953,1.3927,-4.3645;.6465,3.0939,-5.2479;2.872,-.3828,-3.3879;3.1221,.2556,-.9814;2.3849,-.9216,-1.9059;.9197,-.7775,-1.7005;3.0938,-2.2398,-1.7216;-.0869,-3.7089,.7149;.2533,-5.1335,-4.7437;-.0161,-4.9303,-3.7034;-.7102,-4.3881,-1.0746;.9595,-4.4758,-2.8184;-1.3293,-5.1391,-3.2765;-1.6771,-4.8666,-1.9553;.6242,-4.2156,-1.4872;1.9882,-4.3022,-3.1422;-2.0886,-5.4934,-3.9764;-2.7109,-5.0048,-1.6291;-.9525,-3.992,.2541;-2.1129,-3.8361,.8768;-2.9751,-4.3281,.4218;-2.139,-3.6948,2.3409;-2.2453,-3.5023,5.1353;-3.3207,-4.0024,3.0309;-1.0126,-3.2887,3.0724;-1.0627,-3.1938,4.4598;-3.3717,-3.9101,4.419;-4.2044,-4.3243,2.4727;-.0679,-3.0558,2.5753;-.1635,-2.8946,5.0056;-4.2961,-4.1634,4.9454;-2.2835,-3.436,6.2262;1.4916,-3.8035,-.5546;2.2249,-3.2333,-.9817;.4642,.4562,-4.5962;-3.0774,-1.9335,-.0071;-3.0113,-1.2106,1.1807;-2.0016,-.522,1.5997;-.6236,.5047,1.3289;-.7995,1.4385,-.2726;.8573,-.6055,1.4698;-.7328,1.6487,2.8084;-4.0371,-1.278,2.0189;-3.9264,-.6686,3.2948;-.4225,.8253,-1.1094;-.1758,2.3501,-.2151;-1.8422,1.7522,-.4579;.9487,-.9542,2.5119;1.7752,-.0529,1.2021;.799,-1.4648,.7823;-.7387,1.0758,3.7526;.1394,2.3271,2.8319;-1.6426,2.2742,2.7745;-3.0667,-1.0705,3.8541;-4.8603,-.9131,3.8184;-3.8255,.4248,3.1961;4.8396,-.5656,.9917;4.4698,-1.9139,.916;3.7952,-2.523,1.9674;3.5079,-1.7695,3.1013;3.924,-.448,3.2353;4.5972,.1471,2.1733;4.6416,-2.4635,-.0102;3.4452,-3.553,1.89;2.6332,-2.3467,4.1269;3.6794,.11,4.1398;4.8952,1.197,2.2396;-.8186,.8274,-4.1679;-1.8851,-.0592,-4.2488;-1.6603,-1.3251,-4.7798;-.4101,-1.7099,-5.252;.6496,-.8171,-5.1525;-.97,1.8104,-3.7127;-2.8785,.2098,-3.8875;-2.7658,-2.2863,-4.8217;-.2781,-2.7071,-5.6692;1.6417,-1.1227,-5.4875;2.2189,-1.6092,5.0004;2.3321,-3.5178,4.027;-2.6382,-3.2658,-5.5216;-3.7473,-2.0472,-4.1498;7.1567,1.0352,-1.5995;6.2079,1.4559,-2.5769;8.5431,1.2359,-1.8422;8.9802,1.804,-3.0136;9.2601,.9156,-1.0799;10.0497,1.9463,-3.192;6.695,2.021,-3.7887;8.0422,2.1895,-4.0011;5.9815,2.3121,-4.563;8.3929,2.6181,-4.9442;3.6089,3.2087,-3.4965;2.51,3.6538,-4.2892;4.5099,4.1899,-2.9942;4.364,5.5189,-3.3134;5.3282,3.8812,-2.3418;5.0726,6.251,-2.9156;2.3933,5.0337,-4.6134;3.3037,5.9489,-4.1461;1.5534,5.3554,-5.2371;3.2037,7.0077,-4.4008;-4.4219,-2.4797,-.4271;-4.299,-3.2358,-1.2203;-4.9774,-2.9262,.414;-5.057,-1.6819,-.8554;-2.1105,-1.5748,-1.1043;-2.3123,-.5591,-1.4885;-1.0483,-1.5991,-.812;-2.2237,-2.2588,-1.956;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648893364929</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006359345069 0.000562832076 0.033696577820 0.005337822877</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029023945 -0.001432510 0.000120587 0.000143086 0.000194800 0.000221420 0.000287507 0.000331558 0.000507318 0.000558490 0.000674403 0.000749001 0.000765821 0.000802845 0.000839826 0.000944873 0.001019988 0.001088844 0.001124453 0.001224853 0.001259147 0.001342474 0.001442914 0.001617629 0.001671769 0.001976752 0.002082480 0.002209638 0.002230384 0.002379093 0.002642365 0.002995786 0.003286251 0.003759786 0.003836333 0.004026023 0.004413439 0.005054278 0.005424657 0.005642793 0.005856732 0.006101241 0.006505147 0.007196122 0.007594384 0.008005182 0.008323931 0.008847950 0.009362614 0.009868847 0.011039359 0.011614239 0.012751794 0.012929747 0.013277806 0.013748146 0.014290821 0.014876425 0.015192374 0.015422460 0.016023680 0.016421052 0.016667039 0.017620514 0.017953854 0.018139507 0.018942757 0.019536509 0.020725193 0.020858672 0.021989378 0.022810219 0.024109331 0.025850481 0.026328709 0.026801429 0.028271363 0.028747102 0.029159832 0.030696195 0.031394609 0.031884954 0.033211162 0.033392046 0.033757363 0.037001591 0.037340572 0.038940578 0.039186661 0.040763589 0.041748756 0.043684746 0.045113221 0.048264930 0.049062483 0.049450094 0.049983729 0.050971664 0.051096618 0.052116845 0.052332653 0.052392557 0.052562566 0.053395734 0.054040850 0.054644337 0.055100405 0.055851907 0.056363905 0.056458822 0.057041636 0.057957825 0.058505848 0.059546852 0.060619104 0.060831336 0.061244903 0.061776027 0.062261894 0.064895194 0.065650044 0.065765942 0.066371871 0.071462314 0.073767031 0.074604439 0.076860085 0.079409825 0.083574085 0.084742836 0.085034726 0.086239742 0.086994526 0.089628088 0.090554030 0.092350804 0.094469407 0.094736197 0.095556378 0.095831310 0.096644035 0.097374489 0.098209633 0.099035203 0.099350640 0.099920783 0.100868017 0.101475770 0.102367762 0.103018430 0.103727354 0.104374770 0.106027956 0.106345647 0.106651744 0.108432120 0.109621829 0.110663092 0.112259908 0.113033616 0.116424297 0.118180870 0.118516410 0.120964307 0.123401064 0.124106109 0.125696660 0.128872948 0.130398509 0.131558094 0.134766798 0.141624387 0.142307562 0.144822600 0.145772152 0.146519634 0.146960967 0.147101882 0.152465070 0.155256032 0.159442855 0.171668673 0.172540572 0.175315431 0.182320769 0.182667930 0.185925552 0.186593954 0.190665480 0.192520489 0.196412987 0.197625953 0.200046449 0.204702633 0.205595634 0.206748977 0.209610904 0.211213196 0.212202096 0.214676156 0.217810983 0.223859346 0.224658790 0.229537253 0.233537290 0.234226162 0.234829916 0.243229896 0.252974138 0.256496542 0.256928565 0.263405211 0.278126388 0.282223032 0.285976304 0.287379838 0.291984837 0.298774774 0.302478006 0.302969546 0.305130902 0.312382574 0.314524039 0.321292925 0.321415748 0.328370607 0.342828745 0.345985155 0.348931017 0.350207763 0.354268108 0.360726577 0.361437556 0.369755390 0.373286935 0.382240625 0.405054985 0.421684991 0.424512199 0.450437616 0.463710331 0.468597008 0.473437703 0.474826076 0.475656219 0.483740852 0.485699835 0.505336053 0.531135178 0.561265755 0.565023131 0.572761737 0.589945950 0.592129880 0.602434478 0.635354403 0.639047609 0.642356873 0.662131482 0.669039588 0.680357973 0.683651588 0.691228539 0.694160925 0.703809991 0.705347260 0.712247390 0.737956121 0.749893259 0.759263594 0.771831587 0.776579454 0.804067236 0.808667007 0.810866604 0.813145202 0.819519033 0.820448154 0.828908248 0.829787662 0.831335373 0.839486520 0.844138852 0.844901971 0.849379058 0.857082815 0.861437880 0.864565416 0.870013630 0.871981196 0.883182621 0.887374810 0.890947256 0.892526105 0.915818466 0.921889722 0.930282705 0.932046464 0.963700530 0.975104528 0.976778636 0.991265909 0.999292438 1.022706460 1.034311156 1.043568304 1.050997451 1.057967540 1.083831507 1.085405314 1.088474566 1.104715151 1.106593827 1.112036102 1.122553390 1.123465608 1.134979384 1.138950130 1.167399430 1.170539724 1.178733673 1.185451247 1.194048735 1.203126115 1.219848607 1.239970948 1.294970588 1.298377312 1.313107649 1.323518244 1.325252995 1.326433842 1.332899911 1.340340379 1.341693900 1.350997921 1.355450871 1.374673653 1.380096046 1.380932688 1.383088505 1.418255172 1.550973611 1.659892665 1.751480984</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">29</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37290507" y3="0.12934163" z3="-0.21432503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43704044" y3="0.09659174" z3="0.34307776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70300329" y3="0.40241155" z3="-0.40863091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80734628" y3="1.2657199" z3="-2.32535011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.43215764" y3="0.54826328" z3="-1.20092385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75433134" y3="0.94339943" z3="-3.6635198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.73437788" y3="1.80681244" z3="-3.20871041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.51141693" y3="2.72330572" z3="-4.68991666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59494034" y3="1.39010266" z3="-4.36513288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.64395037" y3="3.09065152" z3="-5.24707216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87278092" y3="-0.38427282" z3="-3.38831896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1213085" y3="0.25315258" z3="-0.98134534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38451657" y3="-0.92356563" z3="-1.90688062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91926554" y3="-0.77894766" z3="-1.70241174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09297162" y3="-2.24188616" z3="-1.72238282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.08961924" y3="-3.70583648" z3="0.71299868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.2458652" y3="-5.13273178" z3="-4.74517515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.02278459" y3="-4.92836914" z3="-3.70488248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.71505063" y3="-4.38366181" z3="-1.07581545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.95406915" y3="-4.47574563" z3="-2.82015493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.33628957" y3="-5.13384541" z3="-3.27749592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.6831931" y3="-4.86005859" z3="-1.95625818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.6197624" y3="-4.21450301" z3="-1.48902338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98312021" y3="-4.30454547" z3="-3.1443316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.09650236" y3="-5.48700109" z3="-3.97702066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.71721148" y3="-4.99591067" z3="-1.62992301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.95579611" y3="-3.98790123" z3="0.25295533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.11713588" y3="-3.82930982" z3="0.8751989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.97748869" y3="-4.32408921" z3="0.42294082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14063852" y3="-3.69157347" z3="2.34082952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24463341" y3="-3.50214766" z3="5.13586067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32200928" y3="-3.9985496" z3="3.0315399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01292614" y3="-3.28844882" z3="3.07227706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06202094" y3="-3.19484556" z3="4.45986663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37204442" y3="-3.90768451" z3="4.41984561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.20647228" y3="-4.31868741" z3="2.4736485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06802031" y3="-3.05665725" z3="2.57498557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.16200963" y3="-2.8974552" z3="5.00551389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29650216" y3="-4.16005178" z3="4.94649608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.28219989" y3="-3.43684687" z3="6.22684428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4883674" y3="-3.80444256" z3="-0.55656676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.22252469" y3="-3.23541778" z3="-0.98340414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.46664171" y3="0.45109964" z3="-4.60018846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07842025" y3="-1.9297708" z3="-0.00341829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.01083646" y3="-1.20536917" z3="1.18385435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.0004831" y3="-0.51722178" z3="1.5999634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.61890793" y3="0.50626679" z3="1.3294186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.7935087" y3="1.44082642" z3="-0.27150201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.85909634" y3="-0.60785969" z3="1.4690002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.72513789" y3="1.64930621" z3="2.80963752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.03483293" y3="-1.27209203" z3="2.02337316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.92083734" y3="-0.66378273" z3="3.29971676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.41897722" y3="0.82659088" z3="-1.10868932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.16675217" y3="2.35030254" z3="-0.21419367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.83527721" y3="1.75801722" z3="-0.45588393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95007691" y3="-0.95772352" z3="2.51067027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.77800137" y3="-0.05662007" z3="1.20171364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79889304" y3="-1.46615604" z3="0.78046046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.73153539" y3="1.07601743" z3="3.75362477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.14849251" y3="2.32586554" z3="2.83288519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.63368117" y3="2.27674527" z3="2.77667618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.06060672" y3="-1.06775423" z3="3.85687656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.85410043" y3="-0.90719764" z3="3.82492611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.81820831" y3="0.42944568" z3="3.201599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83924205" y3="-0.56684772" z3="0.9922304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46894198" y3="-1.91493938" z3="0.91590123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79503926" y3="-2.52455056" z3="1.96740148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50869456" y3="-1.77168701" z3="3.1019563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92526336" y3="-0.45040108" z3="3.23658273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59794584" y3="0.14516539" z3="2.17450898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.63983788" y3="-2.46395378" z3="-0.01078227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44470279" y3="-3.55443097" z3="1.88964463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63432251" y3="-2.34922099" z3="4.12770592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.68139623" y3="0.10710239" z3="4.14157726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89634858" y3="1.19491319" z3="2.24132209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81752514" y3="0.81586599" z3="-4.17120056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88068682" y3="-0.07407482" z3="-4.25378278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.6508968" y3="-1.33676637" z3="-4.78744027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.39978515" y3="-1.71466853" z3="-5.26503709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.65655126" y3="-0.81903279" z3="-5.16217972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97167641" y3="1.79657545" z3="-3.71480442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.87519552" y3="0.18977794" z3="-3.89274141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.75133444" y3="-2.304249" z3="-4.83346595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.26303306" y3="-2.70912829" z3="-5.6931074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.64979661" y3="-1.11947501" z3="-5.49927413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.22061519" y3="-1.61212432" z3="5.00182712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33272884" y3="-3.52021146" z3="4.02715608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.62037942" y3="-3.27548836" z3="-5.55158803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.73193756" y3="-2.08093514" z3="-4.14704534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1553241" y3="1.03714523" z3="-1.59782914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.20642836" y3="1.45758534" z3="-2.57516129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.54161754" y3="1.23911994" z3="-1.84008833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.97853242" y3="1.8082711" z3="-3.011055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.2587486" y3="0.9189602" z3="-1.07788361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.04793462" y3="1.95157453" z3="-3.18925962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.69325578" y3="2.02388554" z3="-3.78644814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.04039556" y3="2.19368418" z3="-3.99843282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97966972" y3="2.31485083" z3="-4.56065855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.3909055" y3="2.62313476" z3="-4.94123696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.6053343" y3="3.20815035" z3="-3.49407401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.50591703" y3="3.65246958" z3="-4.28654762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.50498177" y3="4.19007207" z3="-2.99082867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.35722112" y3="5.51915862" z3="-3.30874771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.32376547" y3="3.88186016" z3="-2.33879043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.06480525" y3="6.25186873" z3="-2.91030184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.38730599" y3="5.03250999" z3="-4.60935673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.29633473" y3="5.94851512" z3="-4.1410568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.54709632" y3="5.35356753" z3="-5.23284817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.19486602" y3="7.00742341" z3="-4.39472741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.42558843" y3="-2.47259406" z3="-0.42146038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.3056867" y3="-3.22827574" z3="-1.21562302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.97950413" y3="-2.91913815" z3="0.4204949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06129771" y3="-1.67374786" z3="-0.84734532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.11499367" y3="-1.56874321" z3="-1.10333752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31481654" y3="-0.5512309" z3="-1.48317452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.05201147" y3="-1.5976759" z3="-0.81457322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.23342667" y3="-2.24864795" z3="-1.95747888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3729,.1293,-.2143;7.437,.0966,.3431;6.703,.4024,-.4086;4.8073,1.2657,-2.3254;4.4322,.5483,-1.2009;2.7543,.9434,-3.6635;3.7344,1.8068,-3.2087;1.5114,2.7233,-4.6899;1.5949,1.3901,-4.3651;.644,3.0907,-5.2471;2.8728,-.3843,-3.3883;3.1213,.2532,-.9813;2.3845,-.9236,-1.9069;.9193,-.7789,-1.7024;3.093,-2.2419,-1.7224;-.0896,-3.7058,.713;.2459,-5.1327,-4.7452;-.0228,-4.9284,-3.7049;-.7151,-4.3837,-1.0758;.9541,-4.4757,-2.8202;-1.3363,-5.1338,-3.2775;-1.6832,-4.8601,-1.9563;.6198,-4.2145,-1.489;1.9831,-4.3045,-3.1443;-2.0965,-5.487,-3.977;-2.7172,-4.9959,-1.6299;-.9558,-3.9879,.253;-2.1171,-3.8293,.8752;-2.9775,-4.3241,.4229;-2.1406,-3.6916,2.3408;-2.2446,-3.5021,5.1359;-3.322,-3.9985,3.0315;-1.0129,-3.2884,3.0723;-1.062,-3.1948,4.4599;-3.372,-3.9077,4.4198;-4.2065,-4.3187,2.4736;-.068,-3.0567,2.575;-.162,-2.8975,5.0055;-4.2965,-4.1601,4.9465;-2.2822,-3.4368,6.2268;1.4884,-3.8044,-.5566;2.2225,-3.2354,-.9834;.4666,.4511,-4.6002;-3.0784,-1.9298,-.0034;-3.0108,-1.2054,1.1839;-2.0005,-.5172,1.6;-.6189,.5063,1.3294;-.7935,1.4408,-.2715;.8591,-.6079,1.469;-.7251,1.6493,2.8096;-4.0348,-1.2721,2.0234;-3.9208,-.6638,3.2997;-.419,.8266,-1.1087;-.1668,2.3503,-.2142;-1.8353,1.758,-.4559;.9501,-.9577,2.5107;1.778,-.0566,1.2017;.7989,-1.4662,.7805;-.7315,1.076,3.7536;.1485,2.3259,2.8329;-1.6337,2.2767,2.7767;-3.0606,-1.0678,3.8569;-4.8541,-.9072,3.8249;-3.8182,.4294,3.2016;4.8392,-.5668,.9922;4.4689,-1.9149,.9159;3.795,-2.5246,1.9674;3.5087,-1.7717,3.102;3.9253,-.4504,3.2366;4.5979,.1452,2.1745;4.6398,-2.464,-.0108;3.4447,-3.5544,1.8896;2.6343,-2.3492,4.1277;3.6814,.1071,4.1416;4.8963,1.1949,2.2413;-.8175,.8159,-4.1712;-1.8807,-.0741,-4.2538;-1.6509,-1.3368,-4.7874;-.3998,-1.7147,-5.265;.6566,-.819,-5.1622;-.9717,1.7966,-3.7148;-2.8752,.1898,-3.8927;-2.7513,-2.3042,-4.8335;-.263,-2.7091,-5.6931;1.6498,-1.1195,-5.4993;2.2206,-1.6121,5.0018;2.3327,-3.5202,4.0272;-2.6204,-3.2755,-5.5516;-3.7319,-2.0809,-4.147;7.1553,1.0371,-1.5978;6.2064,1.4576,-2.5752;8.5416,1.2391,-1.8401;8.9785,1.8083,-3.0111;9.2587,.919,-1.0779;10.0479,1.9516,-3.1893;6.6933,2.0239,-3.7864;8.0404,2.1937,-3.9984;5.9797,2.3149,-4.5607;8.3909,2.6231,-4.9412;3.6053,3.2082,-3.4941;2.5059,3.6525,-4.2865;4.505,4.1901,-2.9908;4.3572,5.5192,-3.3087;5.3238,3.8819,-2.3388;5.0648,6.2519,-2.9103;2.3873,5.0325,-4.6094;3.2963,5.9485,-4.1411;1.5471,5.3536,-5.2328;3.1949,7.0074,-4.3947;-4.4256,-2.4726,-.4215;-4.3057,-3.2283,-1.2156;-4.9795,-2.9191,.4205;-5.0613,-1.6737,-.8473;-2.115,-1.5687,-1.1033;-2.3148,-.5512,-1.4832;-1.052,-1.5977,-.8146;-2.2334,-2.2486,-1.9575;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.648950960873</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007429338455 0.000693553554 0.023302567176 0.005337914291</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029020092 -0.002099839 0.000123813 0.000143039 0.000195241 0.000221959 0.000287510 0.000332096 0.000507362 0.000558513 0.000676642 0.000751012 0.000765906 0.000804762 0.000839827 0.000945286 0.001023075 0.001088950 0.001125097 0.001224833 0.001259142 0.001343089 0.001444885 0.001618131 0.001671891 0.001976785 0.002082671 0.002209959 0.002230273 0.002379187 0.002643124 0.002995746 0.003286252 0.003759686 0.003836515 0.004025997 0.004414814 0.005054133 0.005426414 0.005659403 0.005867737 0.006101278 0.006505805 0.007200928 0.007598326 0.008030149 0.008337754 0.008852735 0.009365969 0.009869539 0.011040112 0.011616968 0.012753447 0.012932706 0.013287722 0.013752659 0.014346045 0.014876349 0.015194178 0.015425696 0.016023600 0.016464738 0.016673865 0.017620464 0.017993015 0.018221560 0.019019036 0.019544621 0.020725086 0.020859852 0.021993992 0.022810929 0.024109460 0.025850899 0.026329600 0.026801457 0.028272567 0.028766397 0.029643136 0.030716814 0.031394776 0.031913153 0.033322526 0.033642936 0.033801061 0.037028125 0.037366899 0.038950556 0.039186654 0.040765389 0.041811480 0.043685622 0.045114692 0.048268378 0.049062484 0.049451398 0.049983710 0.050972174 0.051165186 0.052116855 0.052332658 0.052392554 0.052565985 0.053395623 0.054041331 0.054646364 0.055104388 0.055853573 0.056364029 0.056458895 0.057043915 0.058043509 0.058553723 0.059555750 0.060619778 0.060832305 0.061244542 0.061776665 0.062262077 0.064895182 0.065650256 0.065768159 0.066380663 0.071473690 0.073767058 0.074611394 0.076863688 0.079450544 0.083576477 0.084774343 0.085039027 0.086242566 0.087003583 0.089629965 0.090561492 0.092366025 0.094477114 0.094788951 0.095556566 0.095831396 0.096644387 0.097374485 0.098209739 0.099036997 0.099350632 0.099920799 0.100869967 0.101476033 0.102368947 0.103020939 0.103727270 0.104374926 0.106030771 0.106390897 0.106661708 0.108432124 0.109623026 0.110663806 0.112259853 0.113038046 0.116455016 0.118189182 0.118518267 0.120965953 0.123401922 0.124183735 0.125714365 0.129418528 0.130398608 0.131558194 0.134768457 0.141632131 0.142307702 0.144826103 0.145772535 0.146520990 0.146961919 0.147102215 0.152464722 0.155255653 0.159442712 0.171669535 0.172541102 0.175317593 0.182320963 0.182668825 0.185925558 0.186593871 0.190670042 0.192520466 0.196413254 0.197626490 0.200046355 0.204702586 0.205623086 0.206748995 0.209610904 0.211217993 0.212204491 0.214675465 0.217812865 0.223859238 0.224659811 0.229537286 0.233537203 0.234227875 0.234831626 0.243230509 0.252975505 0.256496540 0.256933833 0.263406195 0.278126580 0.282223032 0.285977033 0.287379837 0.291985101 0.298774840 0.302478065 0.302971195 0.305130890 0.312382864 0.314524027 0.321293013 0.321415806 0.328371508 0.342828842 0.345995515 0.348931031 0.350208910 0.354268168 0.360728021 0.361438896 0.369755594 0.373276935 0.382295543 0.405103137 0.421688263 0.424513521 0.450438054 0.463722701 0.468597055 0.473439963 0.474841859 0.475657350 0.484131579 0.485699982 0.505450401 0.531220554 0.561357220 0.565076853 0.573181465 0.589946549 0.592131559 0.602450781 0.635357125 0.639047677 0.642378871 0.662131631 0.669079572 0.680358026 0.683651700 0.691228797 0.694161241 0.703809992 0.705436148 0.712283721 0.737963576 0.749893277 0.759263706 0.771831658 0.776579803 0.804067298 0.808667310 0.810867225 0.813145200 0.819525171 0.820448135 0.828914630 0.829799990 0.831349208 0.839490459 0.844138857 0.844902162 0.849379223 0.857093083 0.861440001 0.864566004 0.870013953 0.872012885 0.883183311 0.887374803 0.890952041 0.892535316 0.915819363 0.921889885 0.930284347 0.932046440 0.963713503 0.975106098 0.976793167 0.991281640 0.999292824 1.022708490 1.034322482 1.043569024 1.051008207 1.057980440 1.083861216 1.085406958 1.088499024 1.104718506 1.106601858 1.112036193 1.122553753 1.123465700 1.134980952 1.138951750 1.167404397 1.170540720 1.178733880 1.185452159 1.194048738 1.203135424 1.219850421 1.239971917 1.295107188 1.300856318 1.313144840 1.323519923 1.325252946 1.326433920 1.332902385 1.340340457 1.341693965 1.353255999 1.355503054 1.374673647 1.380101631 1.380932718 1.383138615 1.418278883 1.550973803 1.659892660 1.751726686</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">30</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3717959" y3="0.12890293" z3="-0.21367166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43578066" y3="0.09817359" z3="0.34440743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.70166543" y3="0.4035611" z3="-0.40740296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80572252" y3="1.26590799" z3="-2.32414238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.4308878" y3="0.54724862" z3="-1.20037996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75430293" y3="0.94163388" z3="-3.66411375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.73254394" y3="1.80620675" z3="-3.20768699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.50915103" y3="2.72047527" z3="-4.68982442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59525406" y3="1.3869216" z3="-4.3671059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.64136358" y3="3.08692286" z3="-5.24711388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87395074" y3="-0.38593901" z3="-3.38897111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12027254" y3="0.25070393" z3="-0.98144991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38414945" y3="-0.92564196" z3="-1.908147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91874608" y3="-0.780706" z3="-1.70464814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09213756" y3="-2.24416008" z3="-1.72348338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.09243137" y3="-3.70271773" z3="0.71123176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.23784661" y3="-5.13138385" z3="-4.74689381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.02980721" y3="-4.92619801" z3="-3.70652643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.72000606" y3="-4.37901255" z3="-1.07744888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.94838831" y3="-4.47549644" z3="-2.82221963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.3435777" y3="-5.12862756" z3="-3.27860137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.6895512" y3="-4.8532791" z3="-1.95746111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.61511033" y3="-4.21321157" z3="-1.49106291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97775657" y3="-4.30686239" z3="-3.14677879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.10492477" y3="-5.47973026" z3="-3.97799483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.72389104" y3="-4.986308" z3="-1.63092098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.95936628" y3="-3.98305532" z3="0.25146326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.12000164" y3="-3.82387457" z3="0.87490352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.98151562" y3="-4.31804686" z3="0.42299269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14209132" y3="-3.68837461" z3="2.34080986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24364617" y3="-3.50239829" z3="5.13632742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32329219" y3="-3.99459965" z3="3.0321135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0131651" y3="-3.28826662" z3="3.07201291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0610569" y3="-3.19630572" z3="4.45979856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37215621" y3="-3.9053937" z3="4.42059872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.20863448" y3="-4.3128829" z3="2.47455851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06808127" y3="-3.05783091" z3="2.5744429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.16012289" y3="-2.90114715" z3="5.00519561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29658775" y3="-4.15705304" z3="4.94759828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.28033543" y3="-3.43820393" z3="6.22742398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4850444" y3="-3.80542522" z3="-0.55873502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2200804" y3="-3.23759641" z3="-0.98541338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.47012155" y3="0.44505687" z3="-4.60558412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08062288" y3="-1.92449875" z3="-0.00015366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00991029" y3="-1.20002007" z3="1.18721928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.99840196" y3="-0.51237552" z3="1.6008774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.61422817" y3="0.50755467" z3="1.33022775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.78681589" y3="1.44341464" z3="-0.27011862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.86085431" y3="-0.61049496" z3="1.46808118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.71689678" y3="1.64990041" z3="2.81123685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.03219432" y3="-1.26597458" z3="2.02872007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.91474056" y3="-0.65898376" z3="3.30539762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.41508695" y3="0.82798312" z3="-1.10770148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.15649775" y3="2.35048169" z3="-0.2130321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.82754189" y3="1.76464449" z3="-0.45358945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95128787" y3="-0.96200413" z3="2.50924425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.78097652" y3="-0.06099904" z3="1.20134153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79842798" y3="-1.46764465" z3="0.77827768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.72380332" y3="1.07604193" z3="3.75487586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.15822549" y3="2.32453938" z3="2.83422347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.62410254" y3="2.27933839" z3="2.77933551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.05401632" y3="-1.06483597" z3="3.86034813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.84726959" y3="-0.90153927" z3="3.83226562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.81068053" y3="0.43414766" z3="3.20797561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83868582" y3="-0.56808879" z3="0.99264086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46790137" y3="-1.91600791" z3="0.91557172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79473473" y3="-2.52620955" z3="1.96719703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.50947881" y3="-1.77409686" z3="3.10253333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92650985" y3="-0.45303074" z3="3.23781493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59858619" y3="0.14310341" z3="2.17566636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.63779625" y3="-2.46436474" z3="-0.01169969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44409173" y3="-3.55595197" z3="1.88900675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63553853" y3="-2.35205294" z3="4.12841963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.68348219" y3="0.10388296" z3="4.14340091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89741165" y3="1.19269611" z3="2.24303699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81503493" y3="0.80345082" z3="-4.17386956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87457518" y3="-0.09085713" z3="-4.25987856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.63969694" y3="-1.35073093" z3="-4.80106171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.38729832" y3="-1.7219474" z3="-5.2780662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.66542586" y3="-0.82218568" z3="-5.17202608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97341114" y3="1.78210672" z3="-3.71289632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.86998167" y3="0.16727637" z3="-3.89637213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.73715761" y3="-2.3215613" z3="-4.85160125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.24909661" y3="-2.71409122" z3="-5.70208536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.65982156" y3="-1.11708894" z3="-5.51036879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.22249138" y3="-1.61540822" z3="5.00320281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33356887" y3="-3.52288241" z3="4.02728166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.60489311" y3="-3.29117302" z3="-5.56019101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.71710097" y3="-2.10100769" z3="-4.17034791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1537053" y3="1.03940527" z3="-1.59610409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.20464083" y3="1.45951078" z3="-2.57340384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.53986088" y3="1.24287083" z3="-1.83791253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.97648627" y3="1.81321165" z3="-3.00841028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.25713182" y3="0.92287756" z3="-1.07576943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.04579537" y3="1.95761175" z3="-3.18630573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.69116936" y3="2.02720649" z3="-3.78415668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.03819605" y3="2.19844973" z3="-3.99571532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97746096" y3="2.3180391" z3="-4.55830952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.38850874" y3="2.62890847" z3="-4.93813325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.60142677" y3="3.20760913" z3="-3.49180975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.50155713" y3="3.65103188" z3="-4.28418045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.49945403" y3="4.19036539" z3="-2.98727746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.34968586" y3="5.51959052" z3="-3.30370369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.31866023" y3="3.88264649" z3="-2.33552979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.05615623" y3="6.25292177" z3="-2.90442541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.38070282" y3="5.03133723" z3="-4.60516364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.28818621" y3="5.94824903" z3="-4.13558995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.54012776" y3="5.35181709" z3="-5.22846379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.18509396" y3="7.00729624" z3="-4.38805351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.42933606" y3="-2.46545343" z3="-0.41544674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.31205201" y3="-3.22082939" z3="-1.21029729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.98217721" y3="-2.91175133" z3="0.42730479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06485641" y3="-1.66529981" z3="-0.83917205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.12050864" y3="-1.56212407" z3="-1.10276895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31892964" y3="-0.54239616" z3="-1.47730689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.05642251" y3="-1.59517242" z3="-0.81875275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.24513135" y3="-2.23770387" z3="-1.95963834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3718,.1289,-.2137;7.4358,.0982,.3444;6.7017,.4036,-.4074;4.8057,1.2659,-2.3241;4.4309,.5472,-1.2004;2.7543,.9416,-3.6641;3.7325,1.8062,-3.2077;1.5092,2.7205,-4.6898;1.5953,1.3869,-4.3671;.6414,3.0869,-5.2471;2.874,-.3859,-3.389;3.1203,.2507,-.9814;2.3841,-.9256,-1.9081;.9187,-.7807,-1.7046;3.0921,-2.2442,-1.7235;-.0924,-3.7027,.7112;.2378,-5.1314,-4.7469;-.0298,-4.9262,-3.7065;-.72,-4.379,-1.0774;.9484,-4.4755,-2.8222;-1.3436,-5.1286,-3.2786;-1.6896,-4.8533,-1.9575;.6151,-4.2132,-1.4911;1.9778,-4.3069,-3.1468;-2.1049,-5.4797,-3.978;-2.7239,-4.9863,-1.6309;-.9594,-3.9831,.2515;-2.12,-3.8239,.8749;-2.9815,-4.318,.423;-2.1421,-3.6884,2.3408;-2.2436,-3.5024,5.1363;-3.3233,-3.9946,3.0321;-1.0132,-3.2883,3.072;-1.0611,-3.1963,4.4598;-3.3722,-3.9054,4.4206;-4.2086,-4.3129,2.4746;-.0681,-3.0578,2.5744;-.1601,-2.9011,5.0052;-4.2966,-4.1571,4.9476;-2.2803,-3.4382,6.2274;1.485,-3.8054,-.5587;2.2201,-3.2376,-.9854;.4701,.4451,-4.6056;-3.0806,-1.9245,-.0002;-3.0099,-1.2,1.1872;-1.9984,-.5124,1.6009;-.6142,.5076,1.3302;-.7868,1.4434,-.2701;.8609,-.6105,1.4681;-.7169,1.6499,2.8112;-4.0322,-1.266,2.0287;-3.9147,-.659,3.3054;-.4151,.828,-1.1077;-.1565,2.3505,-.213;-1.8275,1.7646,-.4536;.9513,-.962,2.5092;1.781,-.061,1.2013;.7984,-1.4676,.7783;-.7238,1.076,3.7549;.1582,2.3245,2.8342;-1.6241,2.2793,2.7793;-3.054,-1.0648,3.8603;-4.8473,-.9015,3.8323;-3.8107,.4341,3.208;4.8387,-.5681,.9926;4.4679,-1.916,.9156;3.7947,-2.5262,1.9672;3.5095,-1.7741,3.1025;3.9265,-.453,3.2378;4.5986,.1431,2.1757;4.6378,-2.4644,-.0117;3.4441,-3.556,1.889;2.6355,-2.3521,4.1284;3.6835,.1039,4.1434;4.8974,1.1927,2.243;-.815,.8035,-4.1739;-1.8746,-.0909,-4.2599;-1.6397,-1.3507,-4.8011;-.3873,-1.7219,-5.2781;.6654,-.8222,-5.172;-.9734,1.7821,-3.7129;-2.87,.1673,-3.8964;-2.7372,-2.3216,-4.8516;-.2491,-2.7141,-5.7021;1.6598,-1.1171,-5.5104;2.2225,-1.6154,5.0032;2.3336,-3.5229,4.0273;-2.6049,-3.2912,-5.5602;-3.7171,-2.101,-4.1703;7.1537,1.0394,-1.5961;6.2046,1.4595,-2.5734;8.5399,1.2429,-1.8379;8.9765,1.8132,-3.0084;9.2571,.9229,-1.0758;10.0458,1.9576,-3.1863;6.6912,2.0272,-3.7842;8.0382,2.1984,-3.9957;5.9775,2.318,-4.5583;8.3885,2.6289,-4.9381;3.6014,3.2076,-3.4918;2.5016,3.651,-4.2842;4.4995,4.1904,-2.9873;4.3497,5.5196,-3.3037;5.3187,3.8826,-2.3355;5.0562,6.2529,-2.9044;2.3807,5.0313,-4.6052;3.2882,5.9482,-4.1356;1.5401,5.3518,-5.2285;3.1851,7.0073,-4.3881;-4.4293,-2.4655,-.4154;-4.3121,-3.2208,-1.2103;-4.9822,-2.9118,.4273;-5.0649,-1.6653,-.8392;-2.1205,-1.5621,-1.1028;-2.3189,-.5424,-1.4773;-1.0564,-1.5952,-.8188;-2.2451,-2.2377,-1.9596;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649004952531</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009074101932 0.000856766788 0.033032604020 0.005337098342</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029031079 -0.003084853 0.000124462 0.000143086 0.000195378 0.000222176 0.000287519 0.000332306 0.000507365 0.000558561 0.000679323 0.000752417 0.000766382 0.000806438 0.000839910 0.000945675 0.001028358 0.001089576 0.001125287 0.001225111 0.001259190 0.001343062 0.001447296 0.001618394 0.001671892 0.001976929 0.002082651 0.002209951 0.002233213 0.002379583 0.002644710 0.002996109 0.003286269 0.003759810 0.003837367 0.004026000 0.004414791 0.005055124 0.005426936 0.005665587 0.005880164 0.006101242 0.006507575 0.007204221 0.007599051 0.008043031 0.008355453 0.008855216 0.009368387 0.009870664 0.011041656 0.011620998 0.012755483 0.012932716 0.013295787 0.013759874 0.014415547 0.014876275 0.015195212 0.015430262 0.016024895 0.016519804 0.016674432 0.017621777 0.018024312 0.018370920 0.019183020 0.019578271 0.020726281 0.020861036 0.021998413 0.022811250 0.024110856 0.025851295 0.026329657 0.026801426 0.028273207 0.028772978 0.030149820 0.030765105 0.031394676 0.031945850 0.033339879 0.033735882 0.034211786 0.037059182 0.037395500 0.038962515 0.039186484 0.040767871 0.041886851 0.043685491 0.045114886 0.048273053 0.049062601 0.049452627 0.049983697 0.050974379 0.051260207 0.052116925 0.052332667 0.052392565 0.052566007 0.053395619 0.054041274 0.054647330 0.055104572 0.055855398 0.056364060 0.056458936 0.057046924 0.058121855 0.058650469 0.059563225 0.060619783 0.060833154 0.061250403 0.061777304 0.062262086 0.064895220 0.065652227 0.065769432 0.066388732 0.071489623 0.073767721 0.074618277 0.076863749 0.079507284 0.083578693 0.084819190 0.085042531 0.086245004 0.087017173 0.089631890 0.090572772 0.092383038 0.094486033 0.094905364 0.095556516 0.095832635 0.096645931 0.097374517 0.098209741 0.099037136 0.099352111 0.099920800 0.100883097 0.101477474 0.102380620 0.103024565 0.103727175 0.104375028 0.106031494 0.106463101 0.106693968 0.108432814 0.109623403 0.110666238 0.112260432 0.113045845 0.116499259 0.118206556 0.118518172 0.120966039 0.123401924 0.124267451 0.125737276 0.130263393 0.130398586 0.131558119 0.134768563 0.141644374 0.142307716 0.144836279 0.145773831 0.146522839 0.146963424 0.147102812 0.152464795 0.155255905 0.159442882 0.171675828 0.172541195 0.175324819 0.182321677 0.182669986 0.185925510 0.186593786 0.190677373 0.192520807 0.196414980 0.197626831 0.200046085 0.204703041 0.205676773 0.206749078 0.209610904 0.211226918 0.212214128 0.214675073 0.217818892 0.223859234 0.224662386 0.229537900 0.233537509 0.234230462 0.234831634 0.243231633 0.252980237 0.256496963 0.256948086 0.263411658 0.278127035 0.282223031 0.285977212 0.287382836 0.291985085 0.298776504 0.302478422 0.302971180 0.305130889 0.312387286 0.314524272 0.321297018 0.321415874 0.328380541 0.342829661 0.346052413 0.348932884 0.350214243 0.354268179 0.360728874 0.361443863 0.369755935 0.373424153 0.382610503 0.405265507 0.421694755 0.424513869 0.450438047 0.463765399 0.468597171 0.473446054 0.474892557 0.475661271 0.484740289 0.485705459 0.505659239 0.531364394 0.561468127 0.565144823 0.573748668 0.589946864 0.592131551 0.602470871 0.635356927 0.639048051 0.642401146 0.662131711 0.669113704 0.680358102 0.683651689 0.691228789 0.694161159 0.703810005 0.705625691 0.712319494 0.737969813 0.749893278 0.759263692 0.771831753 0.776579975 0.804067344 0.808667369 0.810867300 0.813145197 0.819530665 0.820448318 0.828915002 0.829813437 0.831349372 0.839490894 0.844138870 0.844902176 0.849379212 0.857092840 0.861439929 0.864566773 0.870015057 0.872050402 0.883183506 0.887374798 0.890951886 0.892552054 0.915819716 0.921890404 0.930284355 0.932046947 0.963713819 0.975106336 0.976841788 0.991308066 0.999293803 1.022712379 1.034347372 1.043583448 1.051014462 1.057987336 1.083905025 1.085407800 1.088540839 1.104718613 1.106610696 1.112036334 1.122553922 1.123465712 1.134980949 1.138951869 1.167406068 1.170541257 1.178733926 1.185455057 1.194048739 1.203140061 1.219855210 1.239974635 1.295164808 1.303701398 1.313208609 1.323520717 1.325254101 1.326435566 1.332902587 1.340340498 1.341694182 1.355242758 1.357140015 1.374673638 1.380108097 1.380932814 1.383204350 1.418280536 1.550974208 1.659892655 1.753078136</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">31</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.37083368" y3="0.12848433" z3="-0.21301264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43464725" y3="0.09950332" z3="0.34571595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.7004971" y3="0.40453741" z3="-0.40620091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80436327" y3="1.26607663" z3="-2.32300663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.42981679" y3="0.54632522" z3="-1.19983891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75410374" y3="0.94029869" z3="-3.66402051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.73098862" y3="1.80573649" z3="-3.2066512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.50692617" y3="2.71812376" z3="-4.68914943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59496017" y3="1.38461254" z3="-4.36740312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.63901769" y3="3.08348598" z3="-5.24695836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87507184" y3="-0.38731847" z3="-3.3893197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11943942" y3="0.24844876" z3="-0.98145013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38379054" y3="-0.92749413" z3="-1.90915297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91826352" y3="-0.78222564" z3="-1.70674422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09111949" y3="-2.24637014" z3="-1.72424826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.09500738" y3="-3.70016004" z3="0.70976503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.2307663" y3="-5.13058837" z3="-4.74817395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.0362263" y3="-4.92418328" z3="-3.70787943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.72478748" y3="-4.37461852" z3="-1.0790152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.94315235" y3="-4.47550929" z3="-2.8238905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.35056719" y3="-5.1231053" z3="-3.27987962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.69569968" y3="-4.84652861" z3="-1.95879895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.61062244" y3="-4.21195586" z3="-1.49280024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97291045" y3="-4.30949807" z3="-3.14857129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.11284594" y3="-5.47204532" z3="-3.97938317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.73028477" y3="-4.97706353" z3="-1.6321813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.96267957" y3="-3.97879793" z3="0.25029696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.12208507" y3="-3.82045563" z3="0.87543004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.9850185" y3="-4.31189331" z3="0.42262176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14356227" y3="-3.68559855" z3="2.3409557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24297717" y3="-3.50264499" z3="5.13656191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32488293" y3="-3.99075123" z3="3.03258799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01367703" y3="-3.28770555" z3="3.07170604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.06049152" y3="-3.19726899" z3="4.45956379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37260375" y3="-3.90314813" z3="4.4211861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.21107279" y3="-4.30707973" z3="2.47525606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06875195" y3="-3.05799994" z3="2.57359423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.15880064" y3="-2.90400082" z3="5.00463815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29696313" y3="-4.15424962" z3="4.94856334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27869346" y3="-3.43984212" z3="6.22776919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.48159821" y3="-3.8062257" z3="-0.5606463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2175367" y3="-3.23936541" z3="-0.98715174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.4726182" y3="0.44036795" z3="-4.60891075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08374245" y3="-1.91755306" z3="0.00166388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00904507" y3="-1.19490059" z3="1.1896303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.99571" y3="-0.50853237" z3="1.60179448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.61005416" y3="0.50852625" z3="1.33079601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.78042042" y3="1.44571198" z3="-0.26907098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.86259734" y3="-0.61273866" z3="1.46710177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.70939543" y3="1.65047961" z3="2.8124165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.02965057" y3="-1.26025533" z3="2.03359074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.90887124" y3="-0.65429329" z3="3.31032586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.41114141" y3="0.82928784" z3="-1.10698395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.14687831" y3="2.35049963" z3="-0.2120769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.82007849" y3="1.77061799" z3="-0.45190732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95236802" y3="-0.96577825" z3="2.50778571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.78395812" y3="-0.06509054" z3="1.20090682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79792844" y3="-1.46882697" z3="0.77621756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.71685394" y3="1.07613687" z3="3.75576131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.16699957" y3="2.32344532" z3="2.83523745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.61542169" y3="2.28164019" z3="2.78143492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.04778716" y3="-1.06159376" z3="3.86356187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.84078217" y3="-0.89590093" z3="3.83876745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.80356063" y3="0.43878647" z3="3.21351335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83813361" y3="-0.56920315" z3="0.99306153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46679561" y3="-1.9169394" z3="0.91531357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79426643" y3="-2.5276388" z3="1.96704782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51005849" y3="-1.77620457" z3="3.10309573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.9275526" y3="-0.45535385" z3="3.23894928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59911912" y3="0.14125899" z3="2.17674062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.63571042" y3="-2.46469769" z3="-0.01250002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44327176" y3="-3.5572328" z3="1.88847678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6365525" y3="-2.35453419" z3="4.12914448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.68529509" y3="0.10104424" z3="4.14505273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.8983471" y3="1.19070463" z3="2.24460584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8139993" y3="0.7921744" z3="-4.17671598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87016542" y3="-0.10609919" z3="-4.26591439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.63105745" y3="-1.36289308" z3="-4.80930466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.37714494" y3="-1.7274636" z3="-5.28952147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.67222243" y3="-0.82404756" z3="-5.18009623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97572165" y3="1.76811365" z3="-3.7106517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.86626167" y3="0.1466829" z3="-3.90083213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.72279649" y3="-2.33871443" z3="-4.85922566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.23203164" y3="-2.71803388" z3="-5.72492683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.66773453" y3="-1.11443181" z3="-5.51883358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.2239427" y3="-1.61823589" z3="5.00439092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33446352" y3="-3.52529687" z3="4.02765658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.58685113" y3="-3.29958982" z3="-5.59322361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.70103107" y3="-2.13352118" z3="-4.16395776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.15231851" y3="1.04137579" z3="-1.59444526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.20313569" y3="1.46119745" z3="-2.57174122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.53834613" y3="1.24616598" z3="-1.83582563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.97473199" y3="1.81754791" z3="-3.00590293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.25572331" y3="0.92633984" z3="-1.07371331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.04395373" y3="1.96293659" z3="-3.18349048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.68941488" y3="2.03008451" z3="-3.78202812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.03633526" y3="2.20259766" z3="-3.99318475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97560985" y3="2.32075429" z3="-4.55615741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.3864897" y3="2.63391571" z3="-4.93526492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.598079" y3="3.20713606" z3="-3.48987537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.49779388" y3="3.64969399" z3="-4.28218789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.4946291" y3="4.1906476" z3="-2.98426899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.34298432" y3="5.51996316" z3="-3.29939258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.31414966" y3="3.8834279" z3="-2.33267502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.04829605" y3="6.2539324" z3="-2.899232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.37503836" y3="5.0300871" z3="-4.60184986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.28101927" y3="5.94786993" z3="-4.13105445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.53415369" y3="5.34998171" z3="-5.22503758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.17635128" y3="7.00703512" z3="-4.38237806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.43323398" y3="-2.45869869" z3="-0.41001015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.31799495" y3="-3.21417384" z3="-1.20499695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9841563" y3="-2.90479709" z3="0.43420288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06943861" y3="-1.65844272" z3="-0.83227642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.12552143" y3="-1.5559561" z3="-1.10270862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32012906" y3="-0.53315161" z3="-1.47164159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0601819" y3="-1.59522012" z3="-0.82310309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.25746301" y3="-2.22740835" z3="-1.96187095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3708,.1285,-.213;7.4346,.0995,.3457;6.7005,.4045,-.4062;4.8044,1.2661,-2.323;4.4298,.5463,-1.1998;2.7541,.9403,-3.664;3.731,1.8057,-3.2067;1.5069,2.7181,-4.6891;1.595,1.3846,-4.3674;.639,3.0835,-5.247;2.8751,-.3873,-3.3893;3.1194,.2484,-.9815;2.3838,-.9275,-1.9092;.9183,-.7822,-1.7067;3.0911,-2.2464,-1.7242;-.095,-3.7002,.7098;.2308,-5.1306,-4.7482;-.0362,-4.9242,-3.7079;-.7248,-4.3746,-1.079;.9432,-4.4755,-2.8239;-1.3506,-5.1231,-3.2799;-1.6957,-4.8465,-1.9588;.6106,-4.212,-1.4928;1.9729,-4.3095,-3.1486;-2.1128,-5.472,-3.9794;-2.7303,-4.9771,-1.6322;-.9627,-3.9788,.2503;-2.1221,-3.8205,.8754;-2.985,-4.3119,.4226;-2.1436,-3.6856,2.341;-2.243,-3.5026,5.1366;-3.3249,-3.9908,3.0326;-1.0137,-3.2877,3.0717;-1.0605,-3.1973,4.4596;-3.3726,-3.9031,4.4212;-4.2111,-4.3071,2.4753;-.0688,-3.058,2.5736;-.1588,-2.904,5.0046;-4.297,-4.1542,4.9486;-2.2787,-3.4398,6.2278;1.4816,-3.8062,-.5606;2.2175,-3.2394,-.9872;.4726,.4404,-4.6089;-3.0837,-1.9176,.0017;-3.009,-1.1949,1.1896;-1.9957,-.5085,1.6018;-.6101,.5085,1.3308;-.7804,1.4457,-.2691;.8626,-.6127,1.4671;-.7094,1.6505,2.8124;-4.0297,-1.2603,2.0336;-3.9089,-.6543,3.3103;-.4111,.8293,-1.107;-.1469,2.3505,-.2121;-1.8201,1.7706,-.4519;.9524,-.9658,2.5078;1.784,-.0651,1.2009;.7979,-1.4688,.7762;-.7169,1.0761,3.7558;.167,2.3234,2.8352;-1.6154,2.2816,2.7814;-3.0478,-1.0616,3.8636;-4.8408,-.8959,3.8388;-3.8036,.4388,3.2135;4.8381,-.5692,.9931;4.4668,-1.9169,.9153;3.7943,-2.5276,1.967;3.5101,-1.7762,3.1031;3.9276,-.4554,3.2389;4.5991,.1413,2.1767;4.6357,-2.4647,-.0125;3.4433,-3.5572,1.8885;2.6366,-2.3545,4.1291;3.6853,.101,4.1451;4.8983,1.1907,2.2446;-.814,.7922,-4.1767;-1.8702,-.1061,-4.2659;-1.6311,-1.3629,-4.8093;-.3771,-1.7275,-5.2895;.6722,-.824,-5.1801;-.9757,1.7681,-3.7107;-2.8663,.1467,-3.9008;-2.7228,-2.3387,-4.8592;-.232,-2.718,-5.7249;1.6677,-1.1144,-5.5188;2.2239,-1.6182,5.0044;2.3345,-3.5253,4.0277;-2.5869,-3.2996,-5.5932;-3.701,-2.1335,-4.164;7.1523,1.0414,-1.5944;6.2031,1.4612,-2.5717;8.5383,1.2462,-1.8358;8.9747,1.8175,-3.0059;9.2557,.9263,-1.0737;10.044,1.9629,-3.1835;6.6894,2.0301,-3.782;8.0363,2.2026,-3.9932;5.9756,2.3208,-4.5562;8.3865,2.6339,-4.9353;3.5981,3.2071,-3.4899;2.4978,3.6497,-4.2822;4.4946,4.1906,-2.9843;4.343,5.52,-3.2994;5.3141,3.8834,-2.3327;5.0483,6.2539,-2.8992;2.375,5.0301,-4.6018;3.281,5.9479,-4.1311;1.5342,5.35,-5.225;3.1764,7.007,-4.3824;-4.4332,-2.4587,-.41;-4.318,-3.2142,-1.205;-4.9842,-2.9048,.4342;-5.0694,-1.6584,-.8323;-2.1255,-1.556,-1.1027;-2.3201,-.5332,-1.4716;-1.0602,-1.5952,-.8231;-2.2575,-2.2274,-1.9619;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649062743532</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.011392535412 0.000991184096 0.022424331519 0.005338117089</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029066091 -0.003417981 0.000125184 0.000143209 0.000195521 0.000222235 0.000287548 0.000332796 0.000507363 0.000558562 0.000680031 0.000752483 0.000766396 0.000806476 0.000840571 0.000945998 0.001029586 0.001089827 0.001125439 0.001225122 0.001259189 0.001343042 0.001447634 0.001618386 0.001671895 0.001977362 0.002082798 0.002210177 0.002232868 0.002379542 0.002645001 0.002996205 0.003286349 0.003759797 0.003838115 0.004025995 0.004415283 0.005058997 0.005427076 0.005665427 0.005886184 0.006101210 0.006511152 0.007204540 0.007599591 0.008042696 0.008363993 0.008855179 0.009368829 0.009870802 0.011042127 0.011622301 0.012757099 0.012932892 0.013298248 0.013763441 0.014447206 0.014876184 0.015195519 0.015432884 0.016028624 0.016548369 0.016678628 0.017622828 0.018036968 0.018470096 0.019332758 0.019666313 0.020729600 0.020862351 0.022004182 0.022811436 0.024113655 0.025851555 0.026329707 0.026801456 0.028273442 0.028776004 0.030515517 0.030955192 0.031396252 0.032000990 0.033348200 0.033745031 0.034751462 0.037087465 0.037417714 0.038972694 0.039186334 0.040769146 0.041944780 0.043686258 0.045115416 0.048277360 0.049062968 0.049453308 0.049983682 0.050977240 0.051343673 0.052117772 0.052332673 0.052392581 0.052566826 0.053395815 0.054041737 0.054647185 0.055104962 0.055857410 0.056364054 0.056458917 0.057049089 0.058163283 0.058778940 0.059568974 0.060619709 0.060833333 0.061272606 0.061777516 0.062262099 0.064895220 0.065654621 0.065772316 0.066394293 0.071506380 0.073770420 0.074622696 0.076871092 0.079568593 0.083581544 0.084865675 0.085048337 0.086246501 0.087033061 0.089633653 0.090581215 0.092402401 0.094491448 0.095067514 0.095556971 0.095836310 0.096658935 0.097374520 0.098209793 0.099046978 0.099357579 0.099921206 0.100905409 0.101479872 0.102397823 0.103028407 0.103727204 0.104375033 0.106031812 0.106514465 0.106746163 0.108434074 0.109623395 0.110669765 0.112261860 0.113053141 0.116550229 0.118220421 0.118522184 0.120966606 0.123401829 0.124356056 0.125760577 0.130398531 0.131452063 0.131582545 0.134768650 0.141658941 0.142307901 0.144846164 0.145774517 0.146524849 0.146969938 0.147110503 0.152465422 0.155256592 0.159443435 0.171684525 0.172541187 0.175334395 0.182322589 0.182671469 0.185925483 0.186593749 0.190687516 0.192520227 0.196417690 0.197627033 0.200045698 0.204703629 0.205739553 0.206749185 0.209610903 0.211238434 0.212226127 0.214675537 0.217826581 0.223859334 0.224666341 0.229538686 0.233538893 0.234232636 0.234832271 0.243233761 0.252990817 0.256498305 0.256972794 0.263421104 0.278127854 0.282223105 0.285977265 0.287391350 0.291986195 0.298780461 0.302478413 0.302971347 0.305131107 0.312397902 0.314524781 0.321311900 0.321415871 0.328399898 0.342829674 0.346172869 0.348934438 0.350228507 0.354268703 0.360729846 0.361451837 0.369756198 0.373786966 0.383275453 0.405549873 0.421704697 0.424520510 0.450438342 0.463871654 0.468597173 0.473447738 0.475033558 0.475675121 0.485295748 0.485722324 0.505956683 0.531569469 0.561585986 0.565214908 0.574452494 0.589947020 0.592133315 0.602490215 0.635356891 0.639048093 0.642424368 0.662131695 0.669146116 0.680358319 0.683651680 0.691228915 0.694164342 0.703810032 0.705854646 0.712355673 0.737975888 0.749893282 0.759263693 0.771831883 0.776580033 0.804067411 0.808667491 0.810867304 0.813145212 0.819539021 0.820449729 0.828924761 0.829835897 0.831351668 0.839493764 0.844138842 0.844902295 0.849379221 0.857095099 0.861442902 0.864568347 0.870023493 0.872081468 0.883185478 0.887374800 0.890951974 0.892584723 0.915820077 0.921891771 0.930284633 0.932049635 0.963714747 0.975106326 0.976930332 0.991341267 0.999295247 1.022717195 1.034376925 1.043610671 1.051017200 1.057989938 1.083941766 1.085407847 1.088579815 1.104719118 1.106615885 1.112036460 1.122553936 1.123465726 1.134982163 1.138952154 1.167406043 1.170541522 1.178733952 1.185459144 1.194048742 1.203140131 1.219861887 1.239979187 1.295193883 1.306513609 1.313325428 1.323522025 1.325256582 1.326438118 1.332902576 1.340340606 1.341694344 1.355341300 1.362544000 1.374673630 1.380118602 1.380933027 1.383320115 1.418281614 1.550974843 1.659892667 1.755650089</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">32</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36976098" y3="0.12798469" z3="-0.21232021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43343598" y3="0.10101549" z3="0.34707653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6991946" y3="0.40564173" z3="-0.40492512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80270947" y3="1.26628791" z3="-2.32170865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.42854837" y3="0.5452536" z3="-1.199232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75370723" y3="0.93876991" z3="-3.66415223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.72900431" y3="1.80526913" z3="-3.20536337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.50426478" y3="2.715567" z3="-4.68837357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59472111" y3="1.38167331" z3="-4.36862324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.63611779" y3="3.08018826" z3="-5.24629003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87586024" y3="-0.38879216" z3="-3.38986306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11841017" y3="0.24593853" z3="-0.98145778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38331198" y3="-0.92961183" z3="-1.91033223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91762396" y3="-0.78392964" z3="-1.70885626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09019265" y3="-2.24859964" z3="-1.72538443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.09797313" y3="-3.69667641" z3="0.70769587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.22291529" y3="-5.12891203" z3="-4.75000755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.04323966" y3="-4.92147903" z3="-3.7097288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.72992621" y3="-4.36952923" z3="-1.0806301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.9374863" y3="-4.47519702" z3="-2.82588678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.35792267" y3="-5.11677927" z3="-3.28136012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.70219551" y3="-4.83879668" z3="-1.96030936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.60590876" y3="-4.21063368" z3="-1.49484286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96767698" y3="-4.31212674" z3="-3.15074585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.12128851" y3="-5.46334808" z3="-3.98083387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.73716607" y3="-4.96637061" z3="-1.63369118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.96630691" y3="-3.97393751" z3="0.24885144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.12614235" y3="-3.81340527" z3="0.87395574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.98789093" y3="-4.307382" z3="0.42332179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14535671" y3="-3.68210621" z3="2.34070736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2422434" y3="-3.50296257" z3="5.13696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32628522" y3="-3.98681257" z3="3.03309098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01415544" y3="-3.28739649" z3="3.07133606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05975222" y3="-3.19868495" z3="4.4594412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37290574" y3="-3.90094282" z3="4.42187172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.21334855" y3="-4.30125366" z3="2.4761013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06903438" y3="-3.05885101" z3="2.57301039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.157233" y3="-2.90742826" z3="5.004284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29730451" y3="-4.15130466" z3="4.9495755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27714358" y3="-3.44142372" z3="6.22825689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47830451" y3="-3.80731632" z3="-0.56267632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.21496192" y3="-3.24166462" z3="-0.9889888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.47564621" y3="0.43418211" z3="-4.6134458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08515878" y3="-1.91374231" z3="0.00546647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00845714" y3="-1.18957253" z3="1.19293574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.99447059" y3="-0.50346858" z3="1.60201079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.60509961" y3="0.50980304" z3="1.33121662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.77343689" y3="1.44803547" z3="-0.26801681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.86436869" y3="-0.61563443" z3="1.4660355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.70129637" y3="1.6508534" z3="2.81361912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.02716021" y3="-1.25413648" z3="2.03853183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.90272665" y3="-0.64937242" z3="3.31574544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.4063378" y3="0.83076758" z3="-1.10627225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.13663919" y3="2.35051672" z3="-0.21073659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.81197407" y3="1.77675248" z3="-0.45033502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95362642" y3="-0.97008287" z3="2.50623939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.78684894" y3="-0.06965645" z3="1.20029386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79752108" y3="-1.47055834" z3="0.77392215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.7092558" y3="1.0760467" z3="3.75667436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.17653503" y3="2.32198064" z3="2.83617617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.60601586" y3="2.28395994" z3="2.78359616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.04087576" y3="-1.0587528" z3="3.8664431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.83379066" y3="-0.89005869" z3="3.84604626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.79579002" y3="0.44357687" z3="3.2195181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8375881" y3="-0.57050528" z3="0.99349074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46565756" y3="-1.91803121" z3="0.9149436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7937931" y3="-2.52930992" z3="1.96676295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51072907" y3="-1.77864436" z3="3.10360946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92874249" y3="-0.45802717" z3="3.24015798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.59976511" y3="0.13914073" z3="2.17791164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.63350982" y3="-2.46510591" z3="-0.01347888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44237482" y3="-3.55872357" z3="1.88769394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63764668" y3="-2.35740869" z3="4.12978413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.68733172" y3="0.09777596" z3="4.14685734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.89946281" y3="1.18842041" z3="2.24635506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81202609" y3="0.77917317" z3="-4.17868402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86410448" y3="-0.1230983" z3="-4.26932642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.61908697" y3="-1.37706692" z3="-4.81975346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.36451596" y3="-1.73404606" z3="-5.30344049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.68095221" y3="-0.82699913" z3="-5.19027751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97706535" y3="1.75331553" z3="-3.71298035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.86117805" y3="0.12425857" z3="-3.90355173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.7079053" y3="-2.35740401" z3="-4.87670996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.21853797" y3="-2.72120366" z3="-5.73904781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.67774984" y3="-1.11116055" z3="-5.53151616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.2257935" y3="-1.62153244" z3="5.00579026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33509007" y3="-3.52801023" z3="4.02761844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.57225333" y3="-3.31639717" z3="-5.59808708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.68443383" y3="-2.15499809" z3="-4.18413823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.15072172" y3="1.04362239" z3="-1.59266247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.20134931" y3="1.46314602" z3="-2.56990709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.53661842" y3="1.2498793" z3="-1.8335859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.97273313" y3="1.8224383" z3="-3.00319299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.25413549" y3="0.93020076" z3="-1.07154041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.04186324" y3="1.96889931" z3="-3.18047082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.6873705" y3="2.03341129" z3="-3.77965658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.03418661" y3="2.20732311" z3="-3.99039716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97346792" y3="2.32395325" z3="-4.55374553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.38415848" y3="2.63960957" z3="-4.93210528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.5941288" y3="3.20671777" z3="-3.48744791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.49332058" y3="3.64839914" z3="-4.27956285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.48921243" y3="4.19105" z3="-2.98081056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.33564521" y3="5.52044495" z3="-3.29464146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.30919198" y3="3.8843703" z3="-2.32951723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.03984114" y3="6.25505698" z3="-2.89371072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.36859215" y3="5.02894131" z3="-4.59785018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.27314421" y3="5.94758686" z3="-4.12601317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.5274524" y3="5.34817984" z3="-5.22102001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.16697989" y3="7.00681075" z3="-4.37637545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.43709608" y3="-2.45173516" z3="-0.40390082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.32490485" y3="-3.20709646" z3="-1.19956278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.98655832" y3="-2.89747534" z3="0.44133886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07369881" y3="-1.65036989" z3="-0.8239283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.13048585" y3="-1.54962853" z3="-1.10167296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32318738" y3="-0.52522781" z3="-1.46597937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.06473871" y3="-1.59268245" z3="-0.82582523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.26722352" y3="-2.21694466" z3="-1.96289587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3698,.128,-.2123;7.4334,.101,.3471;6.6992,.4056,-.4049;4.8027,1.2663,-2.3217;4.4285,.5453,-1.1992;2.7537,.9388,-3.6642;3.729,1.8053,-3.2054;1.5043,2.7156,-4.6884;1.5947,1.3817,-4.3686;.6361,3.0802,-5.2463;2.8759,-.3888,-3.3899;3.1184,.2459,-.9815;2.3833,-.9296,-1.9103;.9176,-.7839,-1.7089;3.0902,-2.2486,-1.7254;-.098,-3.6967,.7077;.2229,-5.1289,-4.75;-.0432,-4.9215,-3.7097;-.7299,-4.3695,-1.0806;.9375,-4.4752,-2.8259;-1.3579,-5.1168,-3.2814;-1.7022,-4.8388,-1.9603;.6059,-4.2106,-1.4948;1.9677,-4.3121,-3.1507;-2.1213,-5.4633,-3.9808;-2.7372,-4.9664,-1.6337;-.9663,-3.9739,.2489;-2.1261,-3.8134,.874;-2.9879,-4.3074,.4233;-2.1454,-3.6821,2.3407;-2.2422,-3.503,5.137;-3.3263,-3.9868,3.0331;-1.0142,-3.2874,3.0713;-1.0598,-3.1987,4.4594;-3.3729,-3.9009,4.4219;-4.2133,-4.3013,2.4761;-.069,-3.0589,2.573;-.1572,-2.9074,5.0043;-4.2973,-4.1513,4.9496;-2.2771,-3.4414,6.2283;1.4783,-3.8073,-.5627;2.215,-3.2417,-.989;.4756,.4342,-4.6134;-3.0852,-1.9137,.0055;-3.0085,-1.1896,1.1929;-1.9945,-.5035,1.602;-.6051,.5098,1.3312;-.7734,1.448,-.268;.8644,-.6156,1.466;-.7013,1.6509,2.8136;-4.0272,-1.2541,2.0385;-3.9027,-.6494,3.3157;-.4063,.8308,-1.1063;-.1366,2.3505,-.2107;-1.812,1.7768,-.4503;.9536,-.9701,2.5062;1.7868,-.0697,1.2003;.7975,-1.4706,.7739;-.7093,1.076,3.7567;.1765,2.322,2.8362;-1.606,2.284,2.7836;-3.0409,-1.0588,3.8664;-4.8338,-.8901,3.846;-3.7958,.4436,3.2195;4.8376,-.5705,.9935;4.4657,-1.918,.9149;3.7938,-2.5293,1.9668;3.5107,-1.7786,3.1036;3.9287,-.458,3.2402;4.5998,.1391,2.1779;4.6335,-2.4651,-.0135;3.4424,-3.5587,1.8877;2.6376,-2.3574,4.1298;3.6873,.0978,4.1469;4.8995,1.1884,2.2464;-.812,.7792,-4.1787;-1.8641,-.1231,-4.2693;-1.6191,-1.3771,-4.8198;-.3645,-1.734,-5.3034;.681,-.827,-5.1903;-.9771,1.7533,-3.713;-2.8612,.1243,-3.9036;-2.7079,-2.3574,-4.8767;-.2185,-2.7212,-5.739;1.6777,-1.1112,-5.5315;2.2258,-1.6215,5.0058;2.3351,-3.528,4.0276;-2.5723,-3.3164,-5.5981;-3.6844,-2.155,-4.1841;7.1507,1.0436,-1.5927;6.2013,1.4631,-2.5699;8.5366,1.2499,-1.8336;8.9727,1.8224,-3.0032;9.2541,.9302,-1.0715;10.0419,1.9689,-3.1805;6.6874,2.0334,-3.7797;8.0342,2.2073,-3.9904;5.9735,2.324,-4.5537;8.3842,2.6396,-4.9321;3.5941,3.2067,-3.4874;2.4933,3.6484,-4.2796;4.4892,4.191,-2.9808;4.3356,5.5204,-3.2946;5.3092,3.8844,-2.3295;5.0398,6.2551,-2.8937;2.3686,5.0289,-4.5979;3.2731,5.9476,-4.126;1.5275,5.3482,-5.221;3.167,7.0068,-4.3764;-4.4371,-2.4517,-.4039;-4.3249,-3.2071,-1.1996;-4.9866,-2.8975,.4413;-5.0737,-1.6504,-.8239;-2.1305,-1.5496,-1.1017;-2.3232,-.5252,-1.466;-1.0647,-1.5927,-.8258;-2.2672,-2.2169,-1.9629;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649138094892</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010404088275 0.000929067637 0.033080289190 0.005337313848</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029170150 -0.003022347 0.000125563 0.000143553 0.000196093 0.000222616 0.000287681 0.000332931 0.000507536 0.000558590 0.000680040 0.000753219 0.000766554 0.000806487 0.000840602 0.000946011 0.001029933 0.001089855 0.001125422 0.001225542 0.001259198 0.001343056 0.001447939 0.001618849 0.001671940 0.001977349 0.002082791 0.002210295 0.002234349 0.002379819 0.002645169 0.002996623 0.003286368 0.003760115 0.003838119 0.004026033 0.004415371 0.005058985 0.005427036 0.005667284 0.005885972 0.006101223 0.006511400 0.007204588 0.007599445 0.008042868 0.008364821 0.008855205 0.009369165 0.009870682 0.011042338 0.011622269 0.012757062 0.012932865 0.013298124 0.013766015 0.014448693 0.014876270 0.015195996 0.015433990 0.016034539 0.016555189 0.016715120 0.017623321 0.018038998 0.018501341 0.019397154 0.019741740 0.020734007 0.020863612 0.022010916 0.022811520 0.024115217 0.025851709 0.026332313 0.026801699 0.028273515 0.028777419 0.030616230 0.031313315 0.031413587 0.032106895 0.033352670 0.033748403 0.035243922 0.037105400 0.037429850 0.038976592 0.039186166 0.040769424 0.041962834 0.043686860 0.045119832 0.048279981 0.049063386 0.049453602 0.049983643 0.050978835 0.051368404 0.052118831 0.052332673 0.052392578 0.052568903 0.053395747 0.054042124 0.054648726 0.055106653 0.055859317 0.056364175 0.056459007 0.057049356 0.058172843 0.058858139 0.059571373 0.060620871 0.060833303 0.061312402 0.061777681 0.062262102 0.064895220 0.065656221 0.065777686 0.066396027 0.071518387 0.073772593 0.074624279 0.076880766 0.079621081 0.083585167 0.084904188 0.085056725 0.086247126 0.087045033 0.089635412 0.090582930 0.092429645 0.094493530 0.095214696 0.095558092 0.095839980 0.096677234 0.097374530 0.098209806 0.099065233 0.099366220 0.099922177 0.100925587 0.101482238 0.102413160 0.103030309 0.103727264 0.104375006 0.106031732 0.106529338 0.106778984 0.108435338 0.109623426 0.110673768 0.112263482 0.113055064 0.116587704 0.118220524 0.118529499 0.120967076 0.123401839 0.124431693 0.125778293 0.130398536 0.131552704 0.132770623 0.134769658 0.141670604 0.142307914 0.144857049 0.145775915 0.146526937 0.146974061 0.147113105 0.152465054 0.155257143 0.159444220 0.171690200 0.172541202 0.175344826 0.182329578 0.182673112 0.185925711 0.186593915 0.190695398 0.192520205 0.196419473 0.197627386 0.200045611 0.204704585 0.205778822 0.206749282 0.209610904 0.211238293 0.212230459 0.214676241 0.217831496 0.223859411 0.224670554 0.229540200 0.233540958 0.234234149 0.234833570 0.243236348 0.253009888 0.256499668 0.256993118 0.263436315 0.278128321 0.282223341 0.285977274 0.287408868 0.291989227 0.298787841 0.302478426 0.302971749 0.305131364 0.312415669 0.314525737 0.321327475 0.321415885 0.328428425 0.342829864 0.346290422 0.348935017 0.350244419 0.354270307 0.360730566 0.361458118 0.369756323 0.374363102 0.384099613 0.405830030 0.421713887 0.424531870 0.450438793 0.464019750 0.468597192 0.473449044 0.475242567 0.475715748 0.485511633 0.485754919 0.506220447 0.531763378 0.561677122 0.565263551 0.575092952 0.589947184 0.592136791 0.602501174 0.635356834 0.639048083 0.642447011 0.662131710 0.669173995 0.680358577 0.683651716 0.691229100 0.694168991 0.703810042 0.706002995 0.712384287 0.737980965 0.749893300 0.759263671 0.771832061 0.776580038 0.804067458 0.808667612 0.810867328 0.813145210 0.819551537 0.820451137 0.828935177 0.829869933 0.831360422 0.839495438 0.844138818 0.844902424 0.849379271 0.857099683 0.861450753 0.864571163 0.870048737 0.872103987 0.883189003 0.887374821 0.890952304 0.892640376 0.915822308 0.921894557 0.930284979 0.932055343 0.963717362 0.975106359 0.977051577 0.991379817 0.999296789 1.022721447 1.034399168 1.043636408 1.051017787 1.057990180 1.083954076 1.085407863 1.088593216 1.104720703 1.106615996 1.112036498 1.122554008 1.123465893 1.134984303 1.138953097 1.167410843 1.170541636 1.178734514 1.185462445 1.194048768 1.203147827 1.219867397 1.239983389 1.295203626 1.308246545 1.313474966 1.323524655 1.325260678 1.326441578 1.332902642 1.340340644 1.341694521 1.355354447 1.367994122 1.374673620 1.380138135 1.380933446 1.383545667 1.418287705 1.550975383 1.659892677 1.759258724</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">33</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36857835" y3="0.12747767" z3="-0.21164954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43206802" y3="0.10251269" z3="0.34849728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.69778177" y3="0.40671996" z3="-0.4036294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80108246" y3="1.26643343" z3="-2.32049267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.42724997" y3="0.54416358" z3="-1.19871357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75372767" y3="0.93702696" z3="-3.66477046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.72723224" y3="1.80463201" z3="-3.20439768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.50227725" y3="2.71281128" z3="-4.68845446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59510245" y3="1.37871257" z3="-4.37054412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.63384481" y3="3.07636364" z3="-5.24664751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87718086" y3="-0.39051211" z3="-3.39059087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11735941" y3="0.24329842" z3="-0.98164997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38296616" y3="-0.93175841" z3="-1.91175941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91713101" y3="-0.78611198" z3="-1.71141992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08925491" y3="-2.25114371" z3="-1.72655228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.10010663" y3="-3.69344253" z3="0.7060219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.21513604" y3="-5.127615" z3="-4.75139875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.05002335" y3="-4.91916436" z3="-3.71105609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.7345639" y3="-4.36480392" z3="-1.08221145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.9319171" y3="-4.47453731" z3="-2.82791292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.36499112" y3="-5.11156629" z3="-3.28209453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.70833934" y3="-4.83184731" z3="-1.96127623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.60142602" y3="-4.2089687" z3="-1.49671956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96233444" y3="-4.31392817" z3="-3.15315118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.1290813" y3="-5.45765878" z3="-3.98081468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.74354098" y3="-4.95667033" z3="-1.63447002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.96931658" y3="-3.96935146" z3="0.24773602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.12694779" y3="-3.8120036" z3="0.87574902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.99148604" y3="-4.30096796" z3="0.42300931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14622688" y3="-3.6798577" z3="2.34137468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24163779" y3="-3.5030271" z3="5.13749243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32763252" y3="-3.98297338" z3="3.03379098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01413157" y3="-3.2873662" z3="3.07164408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05899294" y3="-3.19984894" z3="4.45973461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37337027" y3="-3.89841793" z3="4.42262602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.21544805" y3="-4.29546415" z3="2.47691326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06892424" y3="-3.06007491" z3="2.57295323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.15572379" y3="-2.91065506" z3="5.00440016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29783343" y3="-4.14795542" z3="4.95056868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27581839" y3="-3.44261011" z3="6.22886929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47498396" y3="-3.80805367" z3="-0.56485362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2127396" y3="-3.24336399" z3="-0.99104001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.47892706" y3="0.42912278" z3="-4.61926143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08956482" y3="-1.90469495" z3="0.00684484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00797593" y3="-1.18399887" z3="1.19530999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.99175501" y3="-0.49932439" z3="1.6032518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.60121604" y3="0.51043748" z3="1.33166031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.76655913" y3="1.45018363" z3="-0.26719764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.86590502" y3="-0.61830229" z3="1.46488313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.69324216" y3="1.65139189" z3="2.81457846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.02487125" y3="-1.24825662" z3="2.04401321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.89660489" y3="-0.64460001" z3="3.32105622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.401674" y3="0.83202468" z3="-1.10580161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.1265009" y3="2.35036425" z3="-0.20961468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.80395349" y3="1.78267379" z3="-0.44921511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95455885" y3="-0.97434791" z3="2.50461012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.78963888" y3="-0.07418835" z3="1.19969048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79691304" y3="-1.47219013" z3="0.7716945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.70179091" y3="1.0761012" z3="3.75734352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.18605262" y3="2.32060052" z3="2.83680727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.59665585" y3="2.28641753" z3="2.78559617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.03431413" y3="-1.05537887" z3="3.86984174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.82686415" y3="-0.88422126" z3="3.85331566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.78837559" y3="0.44830365" z3="3.22548563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83690943" y3="-0.57181323" z3="0.99389835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46441057" y3="-1.91914464" z3="0.91457679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79321865" y3="-2.53099063" z3="1.96648048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51127501" y3="-1.78109759" z3="3.10412538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.92984147" y3="-0.46073931" z3="3.24137017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60031422" y3="0.13698375" z3="2.17907722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.63125356" y3="-2.4655363" z3="-0.01444265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44141534" y3="-3.56023483" z3="1.88694948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63859541" y3="-2.36026383" z3="4.13040773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.68928428" y3="0.09447049" z3="4.14866167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90048227" y3="1.18609104" z3="2.24811139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80967933" y3="0.76805754" z3="-4.18339332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8585696" y3="-0.13834844" z3="-4.27804396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.60989715" y3="-1.38897681" z3="-4.83095171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.3539642" y3="-1.73999923" z3="-5.31432068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.68819045" y3="-0.82930877" z3="-5.19941157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97932112" y3="1.73934844" z3="-3.70833445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.85621648" y3="0.10293359" z3="-3.90865589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.69344256" y3="-2.37334089" z3="-4.88571781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.20286994" y3="-2.72585967" z3="-5.75244402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.68584703" y3="-1.10910385" z3="-5.5404877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.22750931" y3="-1.62490106" z3="5.00714609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33554694" y3="-3.53069258" z3="4.02757167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.55385262" y3="-3.3241689" z3="-5.63116737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.6691252" y3="-2.18554109" z3="-4.18300656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.14906746" y3="1.04581144" z3="-1.59084941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.19956182" y3="1.46501715" z3="-2.56808404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.53482801" y3="1.2535365" z3="-1.83129251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.97068373" y3="1.82726543" z3="-3.000425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.25246059" y3="0.93402186" z3="-1.06928839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.03972169" y3="1.97480707" z3="-3.17736991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.68531327" y3="2.03665478" z3="-3.77729548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.03201616" y3="2.21198056" z3="-3.98758519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97130656" y3="2.3270756" z3="-4.55133787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.3818155" y3="2.64525816" z3="-4.92890445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.59040372" y3="3.20614651" z3="-3.48532714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.48926354" y3="3.64693913" z3="-4.27746913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.4838663" y3="4.19131319" z3="-2.97744372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.32841076" y3="5.52081262" z3="-3.28997758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.30417837" y3="3.88517616" z3="-2.32631997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.03151719" y3="6.25604651" z3="-2.88826785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.36236988" y3="5.02768861" z3="-4.59410334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.26540002" y3="5.94724039" z3="-4.12105136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.52088274" y3="5.34633536" z3="-5.21712054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.15769135" y3="7.00658755" z3="-4.37033711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.44160034" y3="-2.44405479" z3="-0.39858869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.33125248" y3="-3.19941085" z3="-1.19442404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9889849" y3="-2.88983146" z3="0.44805007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07917632" y3="-1.64273501" z3="-0.81692216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.13562337" y3="-1.54330603" z3="-1.10144825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32541553" y3="-0.517104" z3="-1.46259863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.06903992" y3="-1.59039147" z3="-0.82854831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.27747306" y3="-2.20858718" z3="-1.96371055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3686,.1275,-.2116;7.4321,.1025,.3485;6.6978,.4067,-.4036;4.8011,1.2664,-2.3205;4.4272,.5442,-1.1987;2.7537,.937,-3.6648;3.7272,1.8046,-3.2044;1.5023,2.7128,-4.6885;1.5951,1.3787,-4.3705;.6338,3.0764,-5.2466;2.8772,-.3905,-3.3906;3.1174,.2433,-.9816;2.383,-.9318,-1.9118;.9171,-.7861,-1.7114;3.0893,-2.2511,-1.7266;-.1001,-3.6934,.706;.2151,-5.1276,-4.7514;-.05,-4.9192,-3.7111;-.7346,-4.3648,-1.0822;.9319,-4.4745,-2.8279;-1.365,-5.1116,-3.2821;-1.7083,-4.8318,-1.9613;.6014,-4.209,-1.4967;1.9623,-4.3139,-3.1532;-2.1291,-5.4577,-3.9808;-2.7435,-4.9567,-1.6345;-.9693,-3.9694,.2477;-2.1269,-3.812,.8757;-2.9915,-4.301,.423;-2.1462,-3.6799,2.3414;-2.2416,-3.503,5.1375;-3.3276,-3.983,3.0338;-1.0141,-3.2874,3.0716;-1.059,-3.1998,4.4597;-3.3734,-3.8984,4.4226;-4.2154,-4.2955,2.4769;-.0689,-3.0601,2.573;-.1557,-2.9107,5.0044;-4.2978,-4.148,4.9506;-2.2758,-3.4426,6.2289;1.475,-3.8081,-.5649;2.2127,-3.2434,-.991;.4789,.4291,-4.6193;-3.0896,-1.9047,.0068;-3.008,-1.184,1.1953;-1.9918,-.4993,1.6033;-.6012,.5104,1.3317;-.7666,1.4502,-.2672;.8659,-.6183,1.4649;-.6932,1.6514,2.8146;-4.0249,-1.2483,2.044;-3.8966,-.6446,3.3211;-.4017,.832,-1.1058;-.1265,2.3504,-.2096;-1.804,1.7827,-.4492;.9546,-.9743,2.5046;1.7896,-.0742,1.1997;.7969,-1.4722,.7717;-.7018,1.0761,3.7573;.1861,2.3206,2.8368;-1.5967,2.2864,2.7856;-3.0343,-1.0554,3.8698;-4.8269,-.8842,3.8533;-3.7884,.4483,3.2255;4.8369,-.5718,.9939;4.4644,-1.9191,.9146;3.7932,-2.531,1.9665;3.5113,-1.7811,3.1041;3.9298,-.4607,3.2414;4.6003,.137,2.1791;4.6313,-2.4655,-.0144;3.4414,-3.5602,1.8869;2.6386,-2.3603,4.1304;3.6893,.0945,4.1487;4.9005,1.1861,2.2481;-.8097,.7681,-4.1834;-1.8586,-.1383,-4.278;-1.6099,-1.389,-4.831;-.354,-1.74,-5.3143;.6882,-.8293,-5.1994;-.9793,1.7393,-3.7083;-2.8562,.1029,-3.9087;-2.6934,-2.3733,-4.8857;-.2029,-2.7259,-5.7524;1.6858,-1.1091,-5.5405;2.2275,-1.6249,5.0071;2.3355,-3.5307,4.0276;-2.5539,-3.3242,-5.6312;-3.6691,-2.1855,-4.183;7.1491,1.0458,-1.5908;6.1996,1.465,-2.5681;8.5348,1.2535,-1.8313;8.9707,1.8273,-3.0004;9.2525,.934,-1.0693;10.0397,1.9748,-3.1774;6.6853,2.0367,-3.7773;8.032,2.212,-3.9876;5.9713,2.3271,-4.5513;8.3818,2.6453,-4.9289;3.5904,3.2061,-3.4853;2.4893,3.6469,-4.2775;4.4839,4.1913,-2.9774;4.3284,5.5208,-3.29;5.3042,3.8852,-2.3263;5.0315,6.256,-2.8883;2.3624,5.0277,-4.5941;3.2654,5.9472,-4.1211;1.5209,5.3463,-5.2171;3.1577,7.0066,-4.3703;-4.4416,-2.4441,-.3986;-4.3313,-3.1994,-1.1944;-4.989,-2.8898,.4481;-5.0792,-1.6427,-.8169;-2.1356,-1.5433,-1.1014;-2.3254,-.5171,-1.4626;-1.069,-1.5904,-.8285;-2.2775,-2.2086,-1.9637;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649212420514</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009513028253 0.000866789392 0.026842447990 0.005337311853</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029343579 -0.002477959 0.000126349 0.000144315 0.000196206 0.000223579 0.000288723 0.000332947 0.000507573 0.000558655 0.000682360 0.000756491 0.000766702 0.000806532 0.000840768 0.000946090 0.001034620 0.001090092 0.001127366 0.001225591 0.001259198 0.001343071 0.001452283 0.001619326 0.001672714 0.001979084 0.002084478 0.002210301 0.002234561 0.002379925 0.002645146 0.002996752 0.003286362 0.003760012 0.003838145 0.004026018 0.004415364 0.005059427 0.005427685 0.005670268 0.005885914 0.006101177 0.006511888 0.007204821 0.007599866 0.008046090 0.008368608 0.008857687 0.009370758 0.009870653 0.011042252 0.011622289 0.012757825 0.012933184 0.013298323 0.013765812 0.014450207 0.014876693 0.015196418 0.015434078 0.016040885 0.016554898 0.016789117 0.017623440 0.018038865 0.018505974 0.019411260 0.019751895 0.020736542 0.020863866 0.022014167 0.022811507 0.024116251 0.025851734 0.026336875 0.026802449 0.028273500 0.028778104 0.030645968 0.031386608 0.031645489 0.032382099 0.033356447 0.033751574 0.035710018 0.037111555 0.037433817 0.038976546 0.039186064 0.040769387 0.041960961 0.043686710 0.045127710 0.048280474 0.049063592 0.049453655 0.049983615 0.050979094 0.051366086 0.052118972 0.052332673 0.052392587 0.052570559 0.053395708 0.054042096 0.054653705 0.055107761 0.055861472 0.056364343 0.056459518 0.057049667 0.058172004 0.058869913 0.059571108 0.060623526 0.060833785 0.061354354 0.061777843 0.062262175 0.064895340 0.065658016 0.065784262 0.066395762 0.071523826 0.073773279 0.074624486 0.076886081 0.079655392 0.083589035 0.084928214 0.085066012 0.086247106 0.087054251 0.089637471 0.090582844 0.092468266 0.094494006 0.095303670 0.095558739 0.095842538 0.096684825 0.097374623 0.098209804 0.099077207 0.099373620 0.099923068 0.100936411 0.101483568 0.102417998 0.103030742 0.103727155 0.104375028 0.106032237 0.106530736 0.106782486 0.108436030 0.109623789 0.110676870 0.112265498 0.113054904 0.116606815 0.118225192 0.118535183 0.120967890 0.123402006 0.124488444 0.125789514 0.130398555 0.131553880 0.133820579 0.134771312 0.141675379 0.142307973 0.144861840 0.145776296 0.146528107 0.146976700 0.147114663 0.152464889 0.155267947 0.159444103 0.171693992 0.172541522 0.175354776 0.182350360 0.182674474 0.185925664 0.186593813 0.190698152 0.192519793 0.196420930 0.197627439 0.200045317 0.204705444 0.205782966 0.206749360 0.209610906 0.211243873 0.212230826 0.214675794 0.217833675 0.223859470 0.224673491 0.229543440 0.233542157 0.234235363 0.234834306 0.243238184 0.253033261 0.256500137 0.257002315 0.263455958 0.278128372 0.282223626 0.285977273 0.287434942 0.291993908 0.298799727 0.302479897 0.302972076 0.305131398 0.312439705 0.314527520 0.321340324 0.321415902 0.328461769 0.342830393 0.346380637 0.348936937 0.350255629 0.354272834 0.360730657 0.361461697 0.369756335 0.374925347 0.384843594 0.406024505 0.421721028 0.424536716 0.450439194 0.464200778 0.468597887 0.473462679 0.475454385 0.475877408 0.485514817 0.485762303 0.506405282 0.531924578 0.561751484 0.565293197 0.575685498 0.589947176 0.592140050 0.602505527 0.635358518 0.639048710 0.642481204 0.662131698 0.669211614 0.680358850 0.683652129 0.691229205 0.694169327 0.703810058 0.706024746 0.712409608 0.737987185 0.749893383 0.759263798 0.771832293 0.776580058 0.804067666 0.808668041 0.810868267 0.813145205 0.819571015 0.820451887 0.828943888 0.829921124 0.831369859 0.839499985 0.844138818 0.844902728 0.849379290 0.857108018 0.861453003 0.864575224 0.870091749 0.872120772 0.883192801 0.887374859 0.890954505 0.892711654 0.915822650 0.921898335 0.930285029 0.932062038 0.963719840 0.975106645 0.977156052 0.991400746 0.999297578 1.022722738 1.034403480 1.043647394 1.051018215 1.057991455 1.083954962 1.085408312 1.088594227 1.104722573 1.106621482 1.112036500 1.122554366 1.123466253 1.134986580 1.138953421 1.167425872 1.170541822 1.178736067 1.185464437 1.194048856 1.203190508 1.219872490 1.239985163 1.295206424 1.309309942 1.313656529 1.323532742 1.325265428 1.326445761 1.332902659 1.340340691 1.341694951 1.355358196 1.372699027 1.374673634 1.380184674 1.380934144 1.384078439 1.418296071 1.550975935 1.659892679 1.762408211</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">34</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36739317" y3="0.126988" z3="-0.2109445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.43066662" y3="0.10406635" z3="0.35003516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.69636134" y3="0.40786561" z3="-0.40223731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79950778" y3="1.26668287" z3="-2.31922347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.4259687" y3="0.54312563" z3="-1.1981655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75338659" y3="0.93580797" z3="-3.66460855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.72546816" y3="1.80425874" z3="-3.20320805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.49969988" y3="2.7104326" z3="-4.68767287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59458916" y3="1.37646593" z3="-4.37058678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.63120625" y3="3.07300053" z3="-5.24640383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87810636" y3="-0.3917683" z3="-3.39123265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11634182" y3="0.24077247" z3="-0.98181639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38273385" y3="-0.93400561" z3="-1.91313426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91673074" y3="-0.78813681" z3="-1.71367602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08879154" y3="-2.25338927" z3="-1.72807519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.10314148" y3="-3.68942741" z3="0.70434954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.2071462" y3="-5.12701226" z3="-4.75259476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.05710638" y3="-4.91731135" z3="-3.71229651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.73948458" y3="-4.36007617" z3="-1.08322436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.92619387" y3="-4.47441144" z3="-2.82959433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.37229196" y3="-5.10646654" z3="-3.28273805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.71451446" y3="-4.82521836" z3="-1.96187266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.59677054" y3="-4.20765558" z3="-1.49849919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95685299" y3="-4.31618922" z3="-3.15531908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.1377568" y3="-5.45024682" z3="-3.98145743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.74994303" y3="-4.94735055" z3="-1.6347978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.97285871" y3="-3.96424389" z3="0.24665564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.13138847" y3="-3.80377804" z3="0.87406654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.99435804" y3="-4.29607005" z3="0.42389393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14820944" y3="-3.67598381" z3="2.3412352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24111308" y3="-3.50316162" z3="5.13809967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32921932" y3="-3.97858649" z3="3.03438618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01475305" y3="-3.28708639" z3="3.0714879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05840766" y3="-3.2013561" z3="4.45986033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37388702" y3="-3.89585339" z3="4.42343181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.21795539" y3="-4.28898452" z3="2.47777075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06928177" y3="-3.06121855" z3="2.5726666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1542737" y3="-2.91441851" z3="5.00433021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29842544" y3="-4.14458854" z3="4.95164591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27449647" y3="-3.44396686" z3="6.22957952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4716868" y3="-3.80861816" z3="-0.56686319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.21024721" y3="-3.24555831" z3="-0.9930704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.48157016" y3="0.42384125" z3="-4.62102361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09017466" y3="-1.90204042" z3="0.01131392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00692763" y3="-1.17867395" z3="1.19886493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.99017219" y3="-0.49427501" z3="1.60355673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.59589523" y3="0.51178382" z3="1.3317538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.75970608" y3="1.4520296" z3="-0.26665342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8676908" y3="-0.62138338" z3="1.46366809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.68477072" y3="1.65193711" z3="2.81528298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.02205422" y3="-1.24175042" z3="2.04878265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.89047042" y3="-0.63935753" z3="3.32637933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.39752296" y3="0.83275932" z3="-1.10564775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.11628842" y3="2.34983017" z3="-0.20933124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.79597537" y3="1.78839148" z3="-0.44785723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9555346" y3="-0.97884007" z3="2.50293027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.79269257" y3="-0.07915403" z3="1.19902724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79642029" y3="-1.47411634" z3="0.76928553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.69385729" y3="1.07625952" z3="3.75780298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.19598788" y3="2.31921541" z3="2.83719087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.5867849" y3="2.28897811" z3="2.78722683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.02749977" y3="-1.05212248" z3="3.87273681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.81989063" y3="-0.87830533" z3="3.86027688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.78081045" y3="0.45341259" z3="3.2314048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83617264" y3="-0.57315094" z3="0.99429139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46304121" y3="-1.92026358" z3="0.91413963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7925115" y3="-2.53271995" z3="1.96611378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51174878" y3="-1.78364022" z3="3.10458657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93086548" y3="-0.46353401" z3="3.24255377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60077961" y3="0.13477663" z3="2.18023337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.62879668" y3="-2.46595264" z3="-0.01549929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.44024975" y3="-3.56176983" z3="1.88603507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.63951896" y3="-2.36325186" z3="4.13101798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.69119849" y3="0.09103873" z3="4.1504694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90143346" y3="1.18370518" z3="2.24988704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80838612" y3="0.75531943" z3="-4.18276827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85312369" y3="-0.15505007" z3="-4.27944627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.59880303" y3="-1.40283454" z3="-4.83984241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.34187148" y3="-1.74576996" z3="-5.3287573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.69644814" y3="-0.83101773" z3="-5.2083743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.97984527" y3="1.72465183" z3="-3.71085855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.85158717" y3="0.08141487" z3="-3.91116422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.6794821" y3="-2.39115819" z3="-4.90300653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.18592178" y3="-2.72829427" z3="-5.77928646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.69517924" y3="-1.10454372" z3="-5.55300213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.22910096" y3="-1.62831281" z3="5.00842775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33612196" y3="-3.53351248" z3="4.02761926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.54071586" y3="-3.33850218" z3="-5.64098391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.65232232" y3="-2.2072463" z3="-4.19948573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.14743222" y3="1.0481223" z3="-1.58890525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.19782262" y3="1.46700562" z3="-2.56616158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.5330507" y3="1.25737938" z3="-1.82881016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.9686611" y3="1.832317" z3="-2.9974408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.25078813" y3="0.93804504" z3="-1.06683147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.03760217" y3="1.98099116" z3="-3.17400346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.68331559" y3="2.04001882" z3="-3.77481248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.02989998" y3="2.21681796" z3="-3.98459638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96922097" y3="2.33023623" z3="-4.54885195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.37953428" y3="2.65108738" z3="-4.92551488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.58668381" y3="3.20573419" z3="-3.48320478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.4851395" y3="3.64557158" z3="-4.27537814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.47851893" y3="4.19172314" z3="-2.97412598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.32108516" y3="5.52129437" z3="-3.2853299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.29911387" y3="3.8861413" z3="-2.3230908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.02290168" y3="6.25722968" z3="-2.88263007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.35627158" y3="5.026381" z3="-4.59067833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.25765295" y3="5.9468692" z3="-4.11628082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.51450231" y3="5.34435642" z3="-5.21364695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.14827851" y3="7.00631789" z3="-4.3643982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.44503242" y3="-2.43731602" z3="-0.3920818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.3379119" y3="-3.19247089" z3="-1.18867581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99141871" y3="-2.88263316" z3="0.45534173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0822258" y3="-1.63438676" z3="-0.80825809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.14033551" y3="-1.53825419" z3="-1.10036017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32987827" y3="-0.51083706" z3="-1.4581218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07284084" y3="-1.58802151" z3="-0.83126055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.28635597" y3="-2.20118214" z3="-1.96398312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3674,.127,-.2109;7.4307,.1041,.35;6.6964,.4079,-.4022;4.7995,1.2667,-2.3192;4.426,.5431,-1.1982;2.7534,.9358,-3.6646;3.7255,1.8043,-3.2032;1.4997,2.7104,-4.6877;1.5946,1.3765,-4.3706;.6312,3.073,-5.2464;2.8781,-.3918,-3.3912;3.1163,.2408,-.9818;2.3827,-.934,-1.9131;.9167,-.7881,-1.7137;3.0888,-2.2534,-1.7281;-.1031,-3.6894,.7043;.2071,-5.127,-4.7526;-.0571,-4.9173,-3.7123;-.7395,-4.3601,-1.0832;.9262,-4.4744,-2.8296;-1.3723,-5.1065,-3.2827;-1.7145,-4.8252,-1.9619;.5968,-4.2077,-1.4985;1.9569,-4.3162,-3.1553;-2.1378,-5.4502,-3.9815;-2.7499,-4.9474,-1.6348;-.9729,-3.9642,.2467;-2.1314,-3.8038,.8741;-2.9944,-4.2961,.4239;-2.1482,-3.676,2.3412;-2.2411,-3.5032,5.1381;-3.3292,-3.9786,3.0344;-1.0148,-3.2871,3.0715;-1.0584,-3.2014,4.4599;-3.3739,-3.8959,4.4234;-4.218,-4.289,2.4778;-.0693,-3.0612,2.5727;-.1543,-2.9144,5.0043;-4.2984,-4.1446,4.9516;-2.2745,-3.444,6.2296;1.4717,-3.8086,-.5669;2.2102,-3.2456,-.9931;.4816,.4238,-4.621;-3.0902,-1.902,.0113;-3.0069,-1.1787,1.1989;-1.9902,-.4943,1.6036;-.5959,.5118,1.3318;-.7597,1.452,-.2667;.8677,-.6214,1.4637;-.6848,1.6519,2.8153;-4.0221,-1.2418,2.0488;-3.8905,-.6394,3.3264;-.3975,.8328,-1.1056;-.1163,2.3498,-.2093;-1.796,1.7884,-.4479;.9555,-.9788,2.5029;1.7927,-.0792,1.199;.7964,-1.4741,.7693;-.6939,1.0763,3.7578;.196,2.3192,2.8372;-1.5868,2.289,2.7872;-3.0275,-1.0521,3.8727;-4.8199,-.8783,3.8603;-3.7808,.4534,3.2314;4.8362,-.5732,.9943;4.463,-1.9203,.9141;3.7925,-2.5327,1.9661;3.5117,-1.7836,3.1046;3.9309,-.4635,3.2426;4.6008,.1348,2.1802;4.6288,-2.466,-.0155;3.4402,-3.5618,1.886;2.6395,-2.3633,4.131;3.6912,.091,4.1505;4.9014,1.1837,2.2499;-.8084,.7553,-4.1828;-1.8531,-.1551,-4.2794;-1.5988,-1.4028,-4.8398;-.3419,-1.7458,-5.3288;.6964,-.831,-5.2084;-.9798,1.7247,-3.7109;-2.8516,.0814,-3.9112;-2.6795,-2.3912,-4.903;-.1859,-2.7283,-5.7793;1.6952,-1.1045,-5.553;2.2291,-1.6283,5.0084;2.3361,-3.5335,4.0276;-2.5407,-3.3385,-5.641;-3.6523,-2.2072,-4.1995;7.1474,1.0481,-1.5889;6.1978,1.467,-2.5662;8.5331,1.2574,-1.8288;8.9687,1.8323,-2.9974;9.2508,.938,-1.0668;10.0376,1.981,-3.174;6.6833,2.04,-3.7748;8.0299,2.2168,-3.9846;5.9692,2.3302,-4.5489;8.3795,2.6511,-4.9255;3.5867,3.2057,-3.4832;2.4851,3.6456,-4.2754;4.4785,4.1917,-2.9741;4.3211,5.5213,-3.2853;5.2991,3.8861,-2.3231;5.0229,6.2572,-2.8826;2.3563,5.0264,-4.5907;3.2577,5.9469,-4.1163;1.5145,5.3444,-5.2136;3.1483,7.0063,-4.3644;-4.445,-2.4373,-.3921;-4.3379,-3.1925,-1.1887;-4.9914,-2.8826,.4553;-5.0822,-1.6344,-.8083;-2.1403,-1.5383,-1.1004;-2.3299,-.5108,-1.4581;-1.0728,-1.588,-.8313;-2.2864,-2.2012,-1.964;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649285191401</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006563608815 0.000724001696 0.029128108029 0.005337336522</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029517238 -0.002340908 0.000126460 0.000144508 0.000199066 0.000227668 0.000288749 0.000333826 0.000508226 0.000558709 0.000686513 0.000762793 0.000770341 0.000806603 0.000842756 0.000946399 0.001047220 0.001091535 0.001132345 0.001225889 0.001259292 0.001343043 0.001461795 0.001620702 0.001675316 0.001982393 0.002084663 0.002210299 0.002235748 0.002379926 0.002645224 0.002996997 0.003286361 0.003759928 0.003838209 0.004026044 0.004416066 0.005060881 0.005427819 0.005671154 0.005888967 0.006102039 0.006512354 0.007204992 0.007599978 0.008047436 0.008381358 0.008862147 0.009376660 0.009870875 0.011042271 0.011622601 0.012760606 0.012933378 0.013298764 0.013765670 0.014461258 0.014877873 0.015196382 0.015434148 0.016049421 0.016559423 0.016923673 0.017623518 0.018040528 0.018505754 0.019413131 0.019754064 0.020737435 0.020863857 0.022014803 0.022812094 0.024116667 0.025851738 0.026339881 0.026803230 0.028273663 0.028778453 0.030661388 0.031388818 0.031779807 0.032921656 0.033367859 0.033760037 0.036340459 0.037112521 0.037433509 0.038978370 0.039186166 0.040769968 0.041991255 0.043687170 0.045138026 0.048280586 0.049063606 0.049453655 0.049983592 0.050979169 0.051444248 0.052119031 0.052332689 0.052392691 0.052571027 0.053395588 0.054042296 0.054661515 0.055108593 0.055862995 0.056364539 0.056460638 0.057052677 0.058181861 0.058871705 0.059574478 0.060628211 0.060835909 0.061395898 0.061777789 0.062262586 0.064895636 0.065659015 0.065791683 0.066398416 0.071524583 0.073773474 0.074624583 0.076889044 0.079672565 0.083592581 0.084940714 0.085075034 0.086247282 0.087063347 0.089641103 0.090586495 0.092533477 0.094494030 0.095334743 0.095559322 0.095843848 0.096684249 0.097374746 0.098209806 0.099078496 0.099373703 0.099923303 0.100936487 0.101483686 0.102418356 0.103030835 0.103727038 0.104375128 0.106033832 0.106532091 0.106784345 0.108436766 0.109624296 0.110679403 0.112265835 0.113057760 0.116613872 0.118255670 0.118541791 0.120968561 0.123401909 0.124538975 0.125796955 0.130398587 0.131554146 0.134667227 0.134798767 0.141678291 0.142308272 0.144866831 0.145777609 0.146529131 0.146975842 0.147112876 0.152467135 0.155313550 0.159444070 0.171696170 0.172541812 0.175367676 0.182407724 0.182676311 0.185925731 0.186593641 0.190699040 0.192519431 0.196422576 0.197627430 0.200045033 0.204705515 0.205792141 0.206749407 0.209610910 0.211292483 0.212231548 0.214675434 0.217834497 0.223859479 0.224676601 0.229551458 0.233543938 0.234236280 0.234835309 0.243239500 0.253070174 0.256500309 0.257004486 0.263488556 0.278128446 0.282223851 0.285977349 0.287477272 0.291999245 0.298821063 0.302482795 0.302972406 0.305131486 0.312475024 0.314530456 0.321346540 0.321415895 0.328503160 0.342830744 0.346429004 0.348938265 0.350261202 0.354276475 0.360730678 0.361462772 0.369756325 0.375490135 0.385365505 0.406092263 0.421724136 0.424543254 0.450439449 0.464384398 0.468598925 0.473470145 0.475545486 0.476309472 0.485616267 0.485807086 0.506490747 0.532031688 0.561805916 0.565305208 0.576209188 0.589947188 0.592143463 0.602505601 0.635358804 0.639048847 0.642536735 0.662131714 0.669274606 0.680359686 0.683652460 0.691229325 0.694172307 0.703810259 0.706043872 0.712434959 0.737996283 0.749893696 0.759263957 0.771832616 0.776580182 0.804067833 0.808668188 0.810868275 0.813145205 0.819599594 0.820453370 0.828953931 0.829995314 0.831379642 0.839504732 0.844138788 0.844902870 0.849379285 0.857116063 0.861455570 0.864580246 0.870148251 0.872136536 0.883196557 0.887374865 0.890955797 0.892790607 0.915823725 0.921902319 0.930285091 0.932070002 0.963722220 0.975107687 0.977225441 0.991405175 0.999297682 1.022722760 1.034405343 1.043647792 1.051024469 1.058001756 1.084010741 1.085412652 1.088655203 1.104724465 1.106659818 1.112036676 1.122555594 1.123467140 1.134988802 1.138953587 1.167466836 1.170542041 1.178740106 1.185465404 1.194049076 1.203337085 1.219875543 1.239985869 1.295206414 1.309784628 1.313816314 1.323551811 1.325269182 1.326448525 1.332903200 1.340340682 1.341695150 1.355359510 1.374673494 1.375345230 1.380270188 1.380934970 1.385191796 1.418308977 1.550976540 1.659892673 1.764697995</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">35</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36619411" y3="0.12642266" z3="-0.2101972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.42926566" y3="0.1057491" z3="0.35166513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6949113" y3="0.40910446" z3="-0.4007447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79779266" y3="1.26697284" z3="-2.31780455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.42463979" y3="0.54193442" z3="-1.19758319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75349868" y3="0.93395178" z3="-3.66549339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.72351805" y3="1.80374495" z3="-3.20199554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.49776835" y3="2.70765011" z3="-4.68780412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59541683" y3="1.37296078" z3="-4.37365889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.62901548" y3="3.06927712" z3="-5.24673374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.87956685" y3="-0.3935656" z3="-3.3921904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11527598" y3="0.23783166" z3="-0.98207371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3824427" y3="-0.93632239" z3="-1.91487302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91627097" y3="-0.79050614" z3="-1.71664345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0878386" y3="-2.25614852" z3="-1.72959504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.10512653" y3="-3.68645989" z3="0.70288572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.19845103" y3="-5.12521629" z3="-4.75412068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.06455075" y3="-4.91500704" z3="-3.71362304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.74410392" y3="-4.35609959" z3="-1.08442488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.92019777" y3="-4.47397206" z3="-2.83164348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.37991997" y3="-5.10144915" z3="-3.28321619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.7208199" y3="-4.81907243" z3="-1.96235671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.59220156" y3="-4.2064148" z3="-1.50026852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95104321" y3="-4.31807293" z3="-3.15792228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.14642642" y3="-5.44402519" z3="-3.98117863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.75644587" y3="-4.93851094" z3="-1.63493662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.97573154" y3="-3.96011096" z3="0.24589197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.13212455" y3="-3.80231147" z3="0.87604885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-2.99756617" y3="-4.29003212" z3="0.42398386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14911163" y3="-3.67351032" z3="2.34210522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24063982" y3="-3.50314141" z3="5.13882619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33072536" y3="-3.97421155" z3="3.03522301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01471161" y3="-3.28714459" z3="3.07205599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05768035" y3="-3.2026737" z3="4.46041338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37456764" y3="-3.89285862" z3="4.42431531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.22027215" y3="-4.28232735" z3="2.47865208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0690738" y3="-3.06276033" z3="2.57291537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.15277195" y3="-2.91801564" z3="5.00474724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29928473" y3="-4.14049678" z3="4.95272366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27333352" y3="-3.44520567" z3="6.23038533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46848303" y3="-3.80955023" z3="-0.56912092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20793484" y3="-3.24740975" z3="-0.99541117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.48541381" y3="0.41779823" z3="-4.63010871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09434881" y3="-1.89313685" z3="0.01269873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00619408" y3="-1.17296539" z3="1.20114486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.98720375" y3="-0.49013101" z3="1.60478578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.59158671" y3="0.51228392" z3="1.33190074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.75318887" y3="1.45358279" z3="-0.2663121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.86957313" y3="-0.6242391" z3="1.46227816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.67590827" y3="1.65260371" z3="2.81577156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.0195956" y3="-1.23545524" z3="2.05409648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.88399707" y3="-0.63421147" z3="3.33159346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.39408793" y3="0.8330978" z3="-1.10573441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.10618968" y3="2.34886976" z3="-0.20950146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.78836005" y3="1.79392856" z3="-0.44642341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95661875" y3="-0.98328733" z3="2.50107416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.79588224" y3="-0.08392978" z3="1.19836077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79627154" y3="-1.47589345" z3="0.76680018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.685549" y3="1.07661178" z3="3.75810437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.20646475" y3="2.31778402" z3="2.83711196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.57648816" y3="2.29174464" z3="2.78879823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.02053411" y3="-1.04853373" z3="3.87591365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.81262939" y3="-0.87198938" z3="3.86752745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.7728906" y3="0.45851915" z3="3.23734704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83547959" y3="-0.57464451" z3="0.99469331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4616481" y3="-1.92151765" z3="0.91358015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79179039" y3="-2.5346338" z3="1.96558037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51229005" y3="-1.78646586" z3="3.10498458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93204429" y3="-0.46665641" z3="3.24380509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60140301" y3="0.13230631" z3="2.18149076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.62627286" y3="-2.46639766" z3="-0.01675793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.4390253" y3="-3.56346551" z3="1.88488505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64050472" y3="-2.36657136" z3="4.13150586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.69329345" y3="0.08722444" z3="4.15238951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90257886" y3="1.18104332" z3="2.25184632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80490647" y3="0.74384483" z3="-4.19019895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84676197" y3="-0.16962952" z3="-4.2900036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.5886843" y3="-1.41365063" z3="-4.85307289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.331191" y3="-1.75126204" z3="-5.34164127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.70405269" y3="-0.83427923" z3="-5.2203293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98143802" y3="1.71012485" z3="-3.70656629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.84581608" y3="0.06033952" z3="-3.91655578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.66433503" y3="-2.4063759" z3="-4.91357545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.17574497" y3="-2.73183527" z3="-5.78097281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.7038817" y3="-1.10342448" z3="-5.56344262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.23114936" y3="-1.63226799" z3="5.00994339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33635633" y3="-3.53661028" z3="4.02713727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.52231291" y3="-3.34622421" z3="-5.67011202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.63646834" y3="-2.23608942" z3="-4.20188806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.14572291" y3="1.05065173" z3="-1.58681106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.19596526" y3="1.4692169" z3="-2.56406121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.53120314" y3="1.26154598" z3="-1.82613576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.96656642" y3="1.8377979" z3="-2.99421866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.24905424" y3="0.94237989" z3="-1.06419074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.03541151" y3="1.98767851" z3="-3.17037587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.6812227" y3="2.04374916" z3="-3.77210033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0276939" y3="2.22210514" z3="-3.98134859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96705475" y3="2.33381323" z3="-4.54613228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.37717096" y3="2.65745165" z3="-4.92183527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.58267798" y3="3.20534714" z3="-3.48060783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.48077102" y3="3.64432821" z3="-4.2727457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.47283802" y3="4.19221153" z3="-2.97023439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.31341226" y3="5.52187713" z3="-3.28007924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.29385521" y3="3.88719935" z3="-2.31943957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.01405266" y3="6.25845373" z3="-2.87653042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.34969807" y3="5.02534059" z3="-4.58643018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.24950485" y3="5.946719" z3="-4.11080935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.50774678" y3="5.34260312" z3="-5.2095135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.13861862" y3="7.00622377" z3="-4.35794335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.44945823" y3="-2.42967121" z3="-0.38642646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.34440947" y3="-3.18499969" z3="-1.18306263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99347596" y3="-2.87483468" z3="0.46273548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08789449" y3="-1.62692981" z3="-0.80087305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.14534712" y3="-1.53220619" z3="-1.10020881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33381162" y3="-0.50451864" z3="-1.45752613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07763533" y3="-1.58298513" z3="-0.83297637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.29386877" y3="-2.19481141" z3="-1.9633344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3662,.1264,-.2102;7.4293,.1057,.3517;6.6949,.4091,-.4007;4.7978,1.267,-2.3178;4.4246,.5419,-1.1976;2.7535,.934,-3.6655;3.7235,1.8037,-3.202;1.4978,2.7077,-4.6878;1.5954,1.373,-4.3737;.629,3.0693,-5.2467;2.8796,-.3936,-3.3922;3.1153,.2378,-.9821;2.3824,-.9363,-1.9149;.9163,-.7905,-1.7166;3.0878,-2.2561,-1.7296;-.1051,-3.6865,.7029;.1985,-5.1252,-4.7541;-.0646,-4.915,-3.7136;-.7441,-4.3561,-1.0844;.9202,-4.474,-2.8316;-1.3799,-5.1014,-3.2832;-1.7208,-4.8191,-1.9624;.5922,-4.2064,-1.5003;1.951,-4.3181,-3.1579;-2.1464,-5.444,-3.9812;-2.7564,-4.9385,-1.6349;-.9757,-3.9601,.2459;-2.1321,-3.8023,.876;-2.9976,-4.29,.424;-2.1491,-3.6735,2.3421;-2.2406,-3.5031,5.1388;-3.3307,-3.9742,3.0352;-1.0147,-3.2871,3.0721;-1.0577,-3.2027,4.4604;-3.3746,-3.8929,4.4243;-4.2203,-4.2823,2.4787;-.0691,-3.0628,2.5729;-.1528,-2.918,5.0047;-4.2993,-4.1405,4.9527;-2.2733,-3.4452,6.2304;1.4685,-3.8096,-.5691;2.2079,-3.2474,-.9954;.4854,.4178,-4.6301;-3.0943,-1.8931,.0127;-3.0062,-1.173,1.2011;-1.9872,-.4901,1.6048;-.5916,.5123,1.3319;-.7532,1.4536,-.2663;.8696,-.6242,1.4623;-.6759,1.6526,2.8158;-4.0196,-1.2355,2.0541;-3.884,-.6342,3.3316;-.3941,.8331,-1.1057;-.1062,2.3489,-.2095;-1.7884,1.7939,-.4464;.9566,-.9833,2.5011;1.7959,-.0839,1.1984;.7963,-1.4759,.7668;-.6855,1.0766,3.7581;.2065,2.3178,2.8371;-1.5765,2.2917,2.7888;-3.0205,-1.0485,3.8759;-4.8126,-.872,3.8675;-3.7729,.4585,3.2373;4.8355,-.5746,.9947;4.4616,-1.9215,.9136;3.7918,-2.5346,1.9656;3.5123,-1.7865,3.105;3.932,-.4667,3.2438;4.6014,.1323,2.1815;4.6263,-2.4664,-.0168;3.439,-3.5635,1.8849;2.6405,-2.3666,4.1315;3.6933,.0872,4.1524;4.9026,1.181,2.2518;-.8049,.7438,-4.1902;-1.8468,-.1696,-4.29;-1.5887,-1.4137,-4.8531;-.3312,-1.7513,-5.3416;.7041,-.8343,-5.2203;-.9814,1.7101,-3.7066;-2.8458,.0603,-3.9166;-2.6643,-2.4064,-4.9136;-.1757,-2.7318,-5.781;1.7039,-1.1034,-5.5634;2.2311,-1.6323,5.0099;2.3364,-3.5366,4.0271;-2.5223,-3.3462,-5.6701;-3.6365,-2.2361,-4.2019;7.1457,1.0507,-1.5868;6.196,1.4692,-2.5641;8.5312,1.2615,-1.8261;8.9666,1.8378,-2.9942;9.2491,.9424,-1.0642;10.0354,1.9877,-3.1704;6.6812,2.0437,-3.7721;8.0277,2.2221,-3.9813;5.9671,2.3338,-4.5461;8.3772,2.6575,-4.9218;3.5827,3.2053,-3.4806;2.4808,3.6443,-4.2727;4.4728,4.1922,-2.9702;4.3134,5.5219,-3.2801;5.2939,3.8872,-2.3194;5.0141,6.2585,-2.8765;2.3497,5.0253,-4.5864;3.2495,5.9467,-4.1108;1.5077,5.3426,-5.2095;3.1386,7.0062,-4.3579;-4.4495,-2.4297,-.3864;-4.3444,-3.185,-1.1831;-4.9935,-2.8748,.4627;-5.0879,-1.6269,-.8009;-2.1453,-1.5322,-1.1002;-2.3338,-.5045,-1.4575;-1.0776,-1.583,-.833;-2.2939,-2.1948,-1.9633;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649346151697</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006384776942 0.000731492248 0.034889726870 0.005338173940</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029670106 -0.002572310 0.000128938 0.000145130 0.000199037 0.000228868 0.000289823 0.000333836 0.000508267 0.000558767 0.000690662 0.000764983 0.000774586 0.000806662 0.000844562 0.000946836 0.001057376 0.001093181 0.001138392 0.001227298 0.001259319 0.001343023 0.001471716 0.001621372 0.001677863 0.001987953 0.002086341 0.002210380 0.002241399 0.002380239 0.002645369 0.002996962 0.003286363 0.003759896 0.003838322 0.004026365 0.004418265 0.005062235 0.005428109 0.005671519 0.005892151 0.006103906 0.006512459 0.007205119 0.007600004 0.008047464 0.008399571 0.008867712 0.009386788 0.009871233 0.011042340 0.011623029 0.012763481 0.012933434 0.013299370 0.013765926 0.014476201 0.014879464 0.015196370 0.015434490 0.016056600 0.016564679 0.017098578 0.017623638 0.018048558 0.018509436 0.019412906 0.019794424 0.020737675 0.020864081 0.022014697 0.022813960 0.024116796 0.025851825 0.026341236 0.026803962 0.028274152 0.028778957 0.030670124 0.031389453 0.031830049 0.033310511 0.033524962 0.033801336 0.037111028 0.037219481 0.037446596 0.038991507 0.039187316 0.040772605 0.042139443 0.043689543 0.045148163 0.048284448 0.049063628 0.049454122 0.049983581 0.050980297 0.051753130 0.052121968 0.052332811 0.052393270 0.052571262 0.053395586 0.054043506 0.054672382 0.055109084 0.055863486 0.056364647 0.056462409 0.057059654 0.058215662 0.058943723 0.059592570 0.060636028 0.060841126 0.061432483 0.061777950 0.062263747 0.064896177 0.065659285 0.065799090 0.066411779 0.071524872 0.073773457 0.074626024 0.076890875 0.079675818 0.083595466 0.084945342 0.085079973 0.086248341 0.087071096 0.089646086 0.090597526 0.092625363 0.094494117 0.095332290 0.095559259 0.095843656 0.096719322 0.097374886 0.098209822 0.099080661 0.099376465 0.099923334 0.100938690 0.101483909 0.102419599 0.103033279 0.103726937 0.104375396 0.106036715 0.106544849 0.106812828 0.108437951 0.109625380 0.110681609 0.112266053 0.113067662 0.116614274 0.118326183 0.118551634 0.120969170 0.123401837 0.124579848 0.125801368 0.130399012 0.131554390 0.134763665 0.135299416 0.141678754 0.142309957 0.144867914 0.145778518 0.146528994 0.146977662 0.147118696 0.152471296 0.155395380 0.159444846 0.171699675 0.172542605 0.175385856 0.182513159 0.182680036 0.185926961 0.186594714 0.190698976 0.192519229 0.196426184 0.197627444 0.200045056 0.204705409 0.205887405 0.206749454 0.209610927 0.211415182 0.212235749 0.214676193 0.217835118 0.223859854 0.224679672 0.229567901 0.233544980 0.234237952 0.234835490 0.243240276 0.253120430 0.256500359 0.257004381 0.263537529 0.278129063 0.282223972 0.285977349 0.287538520 0.292005272 0.298853876 0.302494464 0.302976064 0.305131508 0.312522398 0.314535281 0.321349649 0.321416043 0.328552417 0.342834336 0.346458079 0.348940860 0.350263533 0.354280489 0.360730673 0.361463041 0.369756431 0.375921406 0.385639982 0.406097451 0.421724816 0.424543339 0.450439781 0.464555590 0.468599588 0.473494912 0.475571330 0.476888191 0.485698510 0.486556373 0.506523898 0.532114706 0.561858547 0.565310026 0.576814171 0.589947855 0.592145723 0.602506275 0.635363509 0.639049958 0.642648488 0.662131711 0.669407334 0.680360093 0.683653404 0.691229379 0.694172171 0.703810928 0.706284659 0.712475238 0.738013869 0.749894603 0.759264200 0.771833111 0.776580635 0.804068138 0.808668820 0.810871175 0.813145207 0.819644955 0.820453791 0.828957152 0.830100807 0.831386596 0.839512914 0.844138799 0.844903121 0.849379290 0.857123615 0.861455753 0.864585588 0.870207243 0.872151159 0.883197714 0.887375065 0.890959350 0.892856224 0.915823652 0.921905288 0.930285085 0.932075790 0.963724644 0.975111601 0.977234637 0.991413656 0.999298048 1.022729716 1.034449960 1.043658024 1.051047249 1.058033291 1.084218276 1.085423531 1.088915717 1.104725539 1.106769226 1.112037347 1.122558431 1.123468879 1.134990286 1.138953771 1.167555195 1.170542414 1.178748361 1.185466231 1.194049560 1.203676013 1.219877772 1.239985834 1.295207925 1.310106011 1.313995451 1.323593321 1.325272240 1.326450606 1.332903274 1.340340678 1.341695445 1.355360425 1.374673533 1.376746278 1.380378816 1.380935654 1.387114192 1.418322892 1.550977178 1.659892664 1.765950021</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">36</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36497917" y3="0.12589921" z3="-0.20953456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.42777961" y3="0.10740931" z3="0.35332322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.69344177" y3="0.41031282" z3="-0.39928326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79627092" y3="1.26711926" z3="-2.31664269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.42338588" y3="0.54081599" z3="-1.19715872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75336949" y3="0.93263323" z3="-3.66564449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.72192227" y3="1.80318601" z3="-3.20109367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.49567204" y3="2.70507566" z3="-4.68775493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5950675" y3="1.37087905" z3="-4.37381048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.62686335" y3="3.06572163" z3="-5.24725827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88066915" y3="-0.39490155" z3="-3.39302932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11430987" y3="0.23518716" z3="-0.98243573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38226928" y3="-0.93863089" z3="-1.91645681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91596712" y3="-0.79254913" z3="-1.71905289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08734345" y3="-2.2585316" z3="-1.73137104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.10802369" y3="-3.68292817" z3="0.70155591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.19017085" y3="-5.12471576" z3="-4.75518603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.07175553" y3="-4.91348505" z3="-3.71460674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.7488865" y3="-4.35196304" z3="-1.08513377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.91426009" y3="-4.47375486" z3="-2.83334846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.3870403" y3="-5.09745571" z3="-3.28322247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.72673388" y3="-4.8135793" z3="-1.96233655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.58752545" y3="-4.20526102" z3="-1.50196145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9451556" y3="-4.31977723" z3="-3.16032517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.15466609" y3="-5.43871522" z3="-3.98066143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.76246324" y3="-4.93065707" z3="-1.63449171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.97912785" y3="-3.95545185" z3="0.24509251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.13614205" y3="-3.79477474" z3="0.87490059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.00068948" y3="-4.28481541" z3="0.42491658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15098184" y3="-3.66967475" z3="2.34223203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24031354" y3="-3.50293732" z3="5.13957427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3323914" y3="-3.96944176" z3="3.03595355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01526401" y3="-3.28694227" z3="3.07217253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05717024" y3="-3.20412164" z3="4.46076741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37529087" y3="-3.88974669" z3="4.42521942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2228429" y3="-4.27530522" z3="2.47959072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06927697" y3="-3.06422983" z3="2.57294624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.15136944" y3="-2.92192614" z3="5.00494241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3001662" y3="-4.1363523" z3="4.95383625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27229592" y3="-3.44616331" z3="6.23121805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46515" y3="-3.81009869" z3="-0.57119172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20546689" y3="-3.24963456" z3="-0.99758199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.48791821" y3="0.4136612" z3="-4.6299732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09491053" y3="-1.89015815" z3="0.01705076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00486072" y3="-1.16766892" z3="1.20460583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.98521302" y3="-0.48522175" z3="1.60518277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.58622616" y3="0.51350133" z3="1.33161292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.74688676" y3="1.45503439" z3="-0.26628609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.871516" y3="-0.62727807" z3="1.46077078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.66696448" y3="1.65334459" z3="2.81587086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.01655316" y3="-1.22889784" z3="2.05882857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.87776158" y3="-0.62868854" z3="3.33664723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.39114151" y3="0.83328565" z3="-1.10618525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.09639809" y3="2.34781371" z3="-0.2104115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.7809697" y3="1.79931294" z3="-0.44502878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95764079" y3="-0.98770136" z3="2.49912717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.79909125" y3="-0.08882898" z3="1.19751741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79612998" y3="-1.47782903" z3="0.76416998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.67702731" y3="1.07714138" z3="3.75806685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.21695376" y3="2.3164655" z3="2.83658575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.5660504" y3="2.29459822" z3="2.78988014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.01378127" y3="-1.04483601" z3="3.8787741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.80561169" y3="-0.86563858" z3="3.87415183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.76517491" y3="0.4638682" z3="3.24276439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83470962" y3="-0.57609368" z3="0.99500078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.46015785" y3="-1.92271354" z3="0.91295016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79095941" y3="-2.53650351" z3="1.96497916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51274133" y3="-1.78925785" z3="3.10529726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93316072" y3="-0.46975439" z3="3.24496338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6019527" y3="0.12986425" z3="2.18265305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.62362892" y3="-2.4668068" z3="-0.01805674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.43764491" y3="-3.56509748" z3="1.88363179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64140117" y3="-2.3698457" z3="4.13194062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.69538639" y3="0.08340533" z3="4.15424341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90369694" y3="1.17838994" z3="2.2537353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80399715" y3="0.73238645" z3="-4.1885607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84185246" y3="-0.18572479" z3="-4.29145682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.57895871" y3="-1.42731844" z3="-4.86046274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.31985007" y3="-1.75704581" z3="-5.35216504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.71155304" y3="-0.83500256" z3="-5.22616663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98209455" y3="1.69673701" z3="-3.70912762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.84159519" y3="0.04016483" z3="-3.92059272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.65165105" y3="-2.42321423" z3="-4.92913081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.1541642" y3="-2.73553704" z3="-5.81586254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.71189015" y3="-1.0985076" z3="-5.57416211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.2329134" y3="-1.63608397" z3="5.01119565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33670736" y3="-3.53963687" z3="4.02684427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.50970332" y3="-3.35849083" z3="-5.68408854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.62099083" y3="-2.25816694" z3="-4.21588187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.14407501" y3="1.0530838" z3="-1.58473989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1942653" y3="1.47125465" z3="-2.56208346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.52940563" y3="1.26563728" z3="-1.82340408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.96456102" y3="1.84317863" z3="-2.99092444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.24732428" y3="0.94668136" z3="-1.0614389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.03330596" y3="1.99427635" z3="-3.16661293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.67929584" y3="2.04729665" z3="-3.76947698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.02564212" y3="2.22725789" z3="-3.9780992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96506446" y3="2.33718992" z3="-4.54351688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.37498544" y3="2.66369444" z3="-4.91812542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.57911416" y3="3.20475633" z3="-3.47870862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.47703273" y3="3.64271621" z3="-4.27120246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.46738496" y3="4.19248129" z3="-2.96674704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.30593562" y3="5.52224852" z3="-3.27511235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.28853989" y3="3.88804638" z3="-2.31587319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="5.0051817" y3="6.25952222" z3="-2.87038446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.34377498" y3="5.02388833" z3="-4.58315935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.24169649" y3="5.94626945" z3="-4.10580101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.50150429" y3="5.34058683" z3="-5.20611032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.12903112" y3="7.00594532" z3="-4.3515529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.45253942" y3="-2.42312459" z3="-0.37987074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.35054928" y3="-3.17834891" z3="-1.17710132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99555417" y3="-2.86782491" z3="0.47001777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09057991" y3="-1.61891066" z3="-0.79229892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.14999511" y3="-1.52730371" z3="-1.09926637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33905185" y3="-0.49823305" z3="-1.45361846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08080523" y3="-1.58044036" z3="-0.83606215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.30289557" y3="-2.18830203" z3="-1.96387491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.365,.1259,-.2095;7.4278,.1074,.3533;6.6934,.4103,-.3993;4.7963,1.2671,-2.3166;4.4234,.5408,-1.1972;2.7534,.9326,-3.6656;3.7219,1.8032,-3.2011;1.4957,2.7051,-4.6878;1.5951,1.3709,-4.3738;.6269,3.0657,-5.2473;2.8807,-.3949,-3.393;3.1143,.2352,-.9824;2.3823,-.9386,-1.9165;.916,-.7925,-1.7191;3.0873,-2.2585,-1.7314;-.108,-3.6829,.7016;.1902,-5.1247,-4.7552;-.0718,-4.9135,-3.7146;-.7489,-4.352,-1.0851;.9143,-4.4738,-2.8333;-1.387,-5.0975,-3.2832;-1.7267,-4.8136,-1.9623;.5875,-4.2053,-1.502;1.9452,-4.3198,-3.1603;-2.1547,-5.4387,-3.9807;-2.7625,-4.9307,-1.6345;-.9791,-3.9555,.2451;-2.1361,-3.7948,.8749;-3.0007,-4.2848,.4249;-2.151,-3.6697,2.3422;-2.2403,-3.5029,5.1396;-3.3324,-3.9694,3.036;-1.0153,-3.2869,3.0722;-1.0572,-3.2041,4.4608;-3.3753,-3.8897,4.4252;-4.2228,-4.2753,2.4796;-.0693,-3.0642,2.5729;-.1514,-2.9219,5.0049;-4.3002,-4.1364,4.9538;-2.2723,-3.4462,6.2312;1.4651,-3.8101,-.5712;2.2055,-3.2496,-.9976;.4879,.4137,-4.63;-3.0949,-1.8902,.0171;-3.0049,-1.1677,1.2046;-1.9852,-.4852,1.6052;-.5862,.5135,1.3316;-.7469,1.455,-.2663;.8715,-.6273,1.4608;-.667,1.6533,2.8159;-4.0166,-1.2289,2.0588;-3.8778,-.6287,3.3366;-.3911,.8333,-1.1062;-.0964,2.3478,-.2104;-1.781,1.7993,-.445;.9576,-.9877,2.4991;1.7991,-.0888,1.1975;.7961,-1.4778,.7642;-.677,1.0771,3.7581;.217,2.3165,2.8366;-1.5661,2.2946,2.7899;-3.0138,-1.0448,3.8788;-4.8056,-.8656,3.8742;-3.7652,.4639,3.2428;4.8347,-.5761,.995;4.4602,-1.9227,.913;3.791,-2.5365,1.965;3.5127,-1.7893,3.1053;3.9332,-.4698,3.245;4.602,.1299,2.1827;4.6236,-2.4668,-.0181;3.4376,-3.5651,1.8836;2.6414,-2.3698,4.1319;3.6954,.0834,4.1542;4.9037,1.1784,2.2537;-.804,.7324,-4.1886;-1.8419,-.1857,-4.2915;-1.579,-1.4273,-4.8605;-.3199,-1.757,-5.3522;.7116,-.835,-5.2262;-.9821,1.6967,-3.7091;-2.8416,.0402,-3.9206;-2.6517,-2.4232,-4.9291;-.1542,-2.7355,-5.8159;1.7119,-1.0985,-5.5742;2.2329,-1.6361,5.0112;2.3367,-3.5396,4.0268;-2.5097,-3.3585,-5.6841;-3.621,-2.2582,-4.2159;7.1441,1.0531,-1.5847;6.1943,1.4713,-2.5621;8.5294,1.2656,-1.8234;8.9646,1.8432,-2.9909;9.2473,.9467,-1.0614;10.0333,1.9943,-3.1666;6.6793,2.0473,-3.7695;8.0256,2.2273,-3.9781;5.9651,2.3372,-4.5435;8.375,2.6637,-4.9181;3.5791,3.2048,-3.4787;2.477,3.6427,-4.2712;4.4674,4.1925,-2.9667;4.3059,5.5222,-3.2751;5.2885,3.888,-2.3159;5.0052,6.2595,-2.8704;2.3438,5.0239,-4.5832;3.2417,5.9463,-4.1058;1.5015,5.3406,-5.2061;3.129,7.0059,-4.3516;-4.4525,-2.4231,-.3799;-4.3505,-3.1783,-1.1771;-4.9956,-2.8678,.47;-5.0906,-1.6189,-.7923;-2.15,-1.5273,-1.0993;-2.3391,-.4982,-1.4536;-1.0808,-1.5804,-.8361;-2.3029,-2.1883,-1.9639;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649409592188</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005252337855 0.000684406523 0.027752754277 0.005337224756</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029782322 -0.002631830 0.000128958 0.000145216 0.000199725 0.000230008 0.000289838 0.000334195 0.000508333 0.000558850 0.000691148 0.000765007 0.000775187 0.000806709 0.000845001 0.000946910 0.001058379 0.001093372 0.001139542 0.001227811 0.001259333 0.001342999 0.001473190 0.001621503 0.001678905 0.001988994 0.002086481 0.002210444 0.002244718 0.002380379 0.002645561 0.002996937 0.003286364 0.003759855 0.003838318 0.004026417 0.004419045 0.005063496 0.005428528 0.005671518 0.005894383 0.006104850 0.006512528 0.007205187 0.007599998 0.008047440 0.008410779 0.008870962 0.009394046 0.009871527 0.011042369 0.011623222 0.012765503 0.012933429 0.013299838 0.013766551 0.014487592 0.014880345 0.015196635 0.015435055 0.016060227 0.016568956 0.017216556 0.017624029 0.018061411 0.018518733 0.019415111 0.019871510 0.020737590 0.020864623 0.022015513 0.022816426 0.024116758 0.025852001 0.026341164 0.026804212 0.028274753 0.028779301 0.030674889 0.031389495 0.031848507 0.033335786 0.033684332 0.033981599 0.037110994 0.037418243 0.038077666 0.039033997 0.039191337 0.040777876 0.042454621 0.043694792 0.045154417 0.048295327 0.049063957 0.049455314 0.049983559 0.050981514 0.052103481 0.052326671 0.052354507 0.052412938 0.052571268 0.053396011 0.054046271 0.054683368 0.055109471 0.055863403 0.056364646 0.056464128 0.057068017 0.058256521 0.059159099 0.059667281 0.060651031 0.060853748 0.061466492 0.061778745 0.062266259 0.064896863 0.065659134 0.065803491 0.066444846 0.071531891 0.073773453 0.074630868 0.076892010 0.079676169 0.083597225 0.084945553 0.085080413 0.086250394 0.087074917 0.089651586 0.090614377 0.092722857 0.094494869 0.095375065 0.095559369 0.095846017 0.096858529 0.097375086 0.098209967 0.099103321 0.099402539 0.099924864 0.100955678 0.101485930 0.102425936 0.103040266 0.103726808 0.104375738 0.106040339 0.106567563 0.106890818 0.108440017 0.109626992 0.110684320 0.112266108 0.113084293 0.116615012 0.118425628 0.118577667 0.120969360 0.123402249 0.124611620 0.125803769 0.130399464 0.131554359 0.134766170 0.135627750 0.141678639 0.142314342 0.144867388 0.145778532 0.146528935 0.146981865 0.147129063 0.152474932 0.155487891 0.159446080 0.171707903 0.172543387 0.175413075 0.182640325 0.182710693 0.185928891 0.186595724 0.190698929 0.192519087 0.196433752 0.197627557 0.200045673 0.204705596 0.206158666 0.206749537 0.209610941 0.211613281 0.212242413 0.214677952 0.217836982 0.223860122 0.224684363 0.229595794 0.233546604 0.234241241 0.234835562 0.243240917 0.253188305 0.256500458 0.257004369 0.263608666 0.278129996 0.282224016 0.285977364 0.287613676 0.292009959 0.298892584 0.302507795 0.302981463 0.305131585 0.312576912 0.314540986 0.321350409 0.321416192 0.328602589 0.342838159 0.346467853 0.348942681 0.350263903 0.354284719 0.360730677 0.361463024 0.369756504 0.376225838 0.385713921 0.406109650 0.421724838 0.424543396 0.450439991 0.464670597 0.468599635 0.473510432 0.475579542 0.477318689 0.485702767 0.488527090 0.506525440 0.532163426 0.561896058 0.565310015 0.577387333 0.589947977 0.592147360 0.602512646 0.635368252 0.639050266 0.642814613 0.662131938 0.669616172 0.680361380 0.683654254 0.691229420 0.694172118 0.703811879 0.707011265 0.712535119 0.738040751 0.749896394 0.759264314 0.771833781 0.776581632 0.804068564 0.808669355 0.810873755 0.813145209 0.819698462 0.820454567 0.828959190 0.830218252 0.831391272 0.839522226 0.844138784 0.844903339 0.849379296 0.857130028 0.861455747 0.864589555 0.870247396 0.872162775 0.883197934 0.887375174 0.890961995 0.892885697 0.915823871 0.921906245 0.930285084 0.932078808 0.963727424 0.975122062 0.977253126 0.991505401 0.999301532 1.022757648 1.034605627 1.043715953 1.051099031 1.058096176 1.084602701 1.085454625 1.089595345 1.104726002 1.107000000 1.112039013 1.122564379 1.123472339 1.134991195 1.138954072 1.167724675 1.170542860 1.178763777 1.185466497 1.194050300 1.204332407 1.219878488 1.239985831 1.295216691 1.310215137 1.314123630 1.323652380 1.325274304 1.326451322 1.332903886 1.340340711 1.341695438 1.355360795 1.374673526 1.377027231 1.380434770 1.380935810 1.388893733 1.418335580 1.550977593 1.659892656 1.766446192</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">37</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36377162" y3="0.12525735" z3="-0.20882229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.42631487" y3="0.10910755" z3="0.35505493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.69197032" y3="0.4115393" z3="-0.3977384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79460765" y3="1.26741302" z3="-2.31523866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.4220744" y3="0.53954898" z3="-1.19662914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75307305" y3="0.93129875" z3="-3.66581776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.71996949" y3="1.80290639" z3="-3.1996656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.49318992" y3="2.70298982" z3="-4.68679007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59514892" y3="1.36817454" z3="-4.37531195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.62424546" y3="3.06265024" z3="-5.24669037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88173287" y3="-0.39632022" z3="-3.39391269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11326514" y3="0.23219178" z3="-0.98270228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38187799" y3="-0.94095329" z3="-1.91822482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91539561" y3="-0.79494407" z3="-1.72200738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08637447" y3="-2.26123793" z3="-1.73315641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.11008264" y3="-3.68014113" z3="0.70037853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.1816316" y3="-5.12393028" z3="-4.75614737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.0790633" y3="-4.91209726" z3="-3.7154486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.75338299" y3="-4.3485593" z3="-1.08587985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.90839026" y3="-4.4739239" z3="-2.83499208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.394604" y3="-5.09323433" z3="-3.28327419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.73290571" y3="-4.80823169" z3="-1.9623333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.58302786" y3="-4.20437676" z3="-1.50343609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93937718" y3="-4.32194273" z3="-3.16269584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.16354358" y3="-5.43249981" z3="-3.98042489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.76876578" y3="-4.92283405" z3="-1.63400775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.981968" y3="-3.951661" z3="0.24465618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.13733337" y3="-3.79256025" z3="0.87655029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.00358683" y3="-4.27927045" z3="0.42540131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15204793" y3="-3.66699875" z3="2.3431441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24003508" y3="-3.50257808" z3="5.14042643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33403176" y3="-3.96472398" z3="3.0368879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0153195" y3="-3.28706583" z3="3.07284663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05656522" y3="-3.2054049" z3="4.46145289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37616939" y3="-3.88628995" z3="4.42620782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.22534072" y3="-4.26808736" z3="2.48051715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06909316" y3="-3.06602656" z3="2.57336309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.15000453" y3="-2.92554679" z3="5.00550771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30130927" y3="-4.13153573" z3="4.95499815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27139804" y3="-3.44691307" z3="6.23213968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46193242" y3="-3.81083984" z3="-0.5733101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20301674" y3="-3.25144036" z3="-0.99998558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.4911327" y3="0.40768616" z3="-4.63827355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09839188" y3="-1.88234951" z3="0.01881582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00387351" y3="-1.16205294" z3="1.20690218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.98221331" y3="-0.48101601" z3="1.60610091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.58163484" y3="0.51410367" z3="1.33135429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.74057134" y3="1.45640121" z3="-0.26640212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.87350731" y3="-0.63012731" z3="1.45911764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.657815" y3="1.65419884" z3="2.81577907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.01385713" y3="-1.22246859" z3="2.06387297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.87121734" y3="-0.62317764" z3="3.34157868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.38813337" y3="0.83334795" z3="-1.10670275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.08647726" y3="2.34660919" z3="-0.2113608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.77355272" y3="1.80468306" z3="-0.44378888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9587017" y3="-0.9920657" z3="2.49703285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.80240272" y3="-0.09360603" z3="1.19663666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79611778" y3="-1.47961416" z3="0.76143892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.66828042" y3="1.0778795" z3="3.75790685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.22771948" y3="2.31519165" z3="2.83564532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.55541471" y3="2.29757773" z3="2.79086286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-3.00678163" y3="-1.04087083" z3="3.8817733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.79831785" y3="-0.85887774" z3="3.88103926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.75714187" y3="0.46929965" z3="3.24817722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83397774" y3="-0.57769172" z3="0.99532549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4586051" y3="-1.92402789" z3="0.91222336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.79005734" y3="-2.53850768" z3="1.96424394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51319756" y3="-1.79223992" z3="3.1055477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93436202" y3="-0.47307961" z3="3.24614497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60261742" y3="0.12722075" z3="2.1838737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.62086298" y3="-2.46724955" z3="-0.01952649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.43614505" y3="-3.56684212" z3="1.88219974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64229881" y3="-2.37333158" z3="4.13227261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.6975802" y3="0.07933061" z3="4.15613822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90496135" y3="1.17552358" z3="2.25572129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80102651" y3="0.72027629" z3="-4.19386351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.83565674" y3="-0.20058909" z3="-4.29901278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.56804949" y3="-1.4379306" z3="-4.87452812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.3088867" y3="-1.7613999" z3="-5.37065614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.71946577" y3="-0.83767001" z3="-5.24085786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98387603" y3="1.68166921" z3="-3.70374961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83611324" y3="0.01830843" z3="-3.92229444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.63598827" y3="-2.43884732" z3="-4.94237502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.14782606" y3="-2.73633377" z3="-5.81693672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.7213774" y3="-1.09579517" z3="-5.58694837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.23487027" y3="-1.64021618" z3="5.01254571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33686175" y3="-3.54288051" z3="4.02622221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.49139591" y3="-3.36764155" z3="-5.70923249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.60448098" y3="-2.2859197" z3="-4.2225236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.14237846" y3="1.05563818" z3="-1.58255316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.19246183" y3="1.47346843" z3="-2.55994302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.52756797" y3="1.26992374" z3="-1.82051593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.96252285" y3="1.84884552" z3="-2.98743113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.2455581" y3="0.95117438" z3="-1.0585284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.03117099" y3="2.00124368" z3="-3.16261213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.67730757" y3="2.05105422" z3="-3.76667817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0235402" y3="2.23267303" z3="-3.9746473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9630469" y3="2.34073419" z3="-4.54077293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.37276469" y3="2.67023594" z3="-4.91419607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.57522219" y3="3.20453816" z3="-3.47604899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.47268017" y3="3.64177971" z3="-4.268336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.46193366" y3="4.19300747" z3="-2.962906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.29852376" y3="5.52284192" z3="-3.26989527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.28341459" y3="3.88906948" z3="-2.31218223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.9964588" y3="6.26074874" z3="-2.86410004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.33758852" y3="5.02295128" z3="-4.57915583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.23396465" y3="5.94611843" z3="-4.10056104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.49524209" y3="5.33887982" z3="-5.20237758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.11980616" y3="7.00581453" z3="-4.34531193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.456652" y3="-2.41585929" z3="-0.3740097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.35685677" y3="-3.1712684" z3="-1.17130815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9973843" y3="-2.86031656" z3="0.47759392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09579624" y3="-1.61167232" z3="-0.7846964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15486535" y3="-1.52179972" z3="-1.09918543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34295546" y3="-0.49256664" z3="-1.45300976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08557703" y3="-1.57590333" z3="-0.83805741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.31008906" y3="-2.18248332" z3="-1.96296301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3638,.1253,-.2088;7.4263,.1091,.3551;6.692,.4115,-.3977;4.7946,1.2674,-2.3152;4.4221,.5395,-1.1966;2.7531,.9313,-3.6658;3.72,1.8029,-3.1997;1.4932,2.703,-4.6868;1.5951,1.3682,-4.3753;.6242,3.0627,-5.2467;2.8817,-.3963,-3.3939;3.1133,.2322,-.9827;2.3819,-.941,-1.9182;.9154,-.7949,-1.722;3.0864,-2.2612,-1.7332;-.1101,-3.6801,.7004;.1816,-5.1239,-4.7561;-.0791,-4.9121,-3.7154;-.7534,-4.3486,-1.0859;.9084,-4.4739,-2.835;-1.3946,-5.0932,-3.2833;-1.7329,-4.8082,-1.9623;.583,-4.2044,-1.5034;1.9394,-4.3219,-3.1627;-2.1635,-5.4325,-3.9804;-2.7688,-4.9228,-1.634;-.982,-3.9517,.2447;-2.1373,-3.7926,.8766;-3.0036,-4.2793,.4254;-2.152,-3.667,2.3431;-2.24,-3.5026,5.1404;-3.334,-3.9647,3.0369;-1.0153,-3.2871,3.0728;-1.0566,-3.2054,4.4615;-3.3762,-3.8863,4.4262;-4.2253,-4.2681,2.4805;-.0691,-3.066,2.5734;-.15,-2.9255,5.0055;-4.3013,-4.1315,4.955;-2.2714,-3.4469,6.2321;1.4619,-3.8108,-.5733;2.203,-3.2514,-1;.4911,.4077,-4.6383;-3.0984,-1.8823,.0188;-3.0039,-1.1621,1.2069;-1.9822,-.481,1.6061;-.5816,.5141,1.3314;-.7406,1.4564,-.2664;.8735,-.6301,1.4591;-.6578,1.6542,2.8158;-4.0139,-1.2225,2.0639;-3.8712,-.6232,3.3416;-.3881,.8333,-1.1067;-.0865,2.3466,-.2114;-1.7736,1.8047,-.4438;.9587,-.9921,2.497;1.8024,-.0936,1.1966;.7961,-1.4796,.7614;-.6683,1.0779,3.7579;.2277,2.3152,2.8356;-1.5554,2.2976,2.7909;-3.0068,-1.0409,3.8818;-4.7983,-.8589,3.881;-3.7571,.4693,3.2482;4.834,-.5777,.9953;4.4586,-1.924,.9122;3.7901,-2.5385,1.9642;3.5132,-1.7922,3.1055;3.9344,-.4731,3.2461;4.6026,.1272,2.1839;4.6209,-2.4672,-.0195;3.4361,-3.5668,1.8822;2.6423,-2.3733,4.1323;3.6976,.0793,4.1561;4.905,1.1755,2.2557;-.801,.7203,-4.1939;-1.8357,-.2006,-4.299;-1.568,-1.4379,-4.8745;-.3089,-1.7614,-5.3707;.7195,-.8377,-5.2409;-.9839,1.6817,-3.7037;-2.8361,.0183,-3.9223;-2.636,-2.4388,-4.9424;-.1478,-2.7363,-5.8169;1.7214,-1.0958,-5.5869;2.2349,-1.6402,5.0125;2.3369,-3.5429,4.0262;-2.4914,-3.3676,-5.7092;-3.6045,-2.2859,-4.2225;7.1424,1.0556,-1.5826;6.1925,1.4735,-2.5599;8.5276,1.2699,-1.8205;8.9625,1.8488,-2.9874;9.2456,.9512,-1.0585;10.0312,2.0012,-3.1626;6.6773,2.0511,-3.7667;8.0235,2.2327,-3.9746;5.963,2.3407,-4.5408;8.3728,2.6702,-4.9142;3.5752,3.2045,-3.476;2.4727,3.6418,-4.2683;4.4619,4.193,-2.9629;4.2985,5.5228,-3.2699;5.2834,3.8891,-2.3122;4.9965,6.2607,-2.8641;2.3376,5.023,-4.5792;3.234,5.9461,-4.1006;1.4952,5.3389,-5.2024;3.1198,7.0058,-4.3453;-4.4567,-2.4159,-.374;-4.3569,-3.1713,-1.1713;-4.9974,-2.8603,.4776;-5.0958,-1.6117,-.7847;-2.1549,-1.5218,-1.0992;-2.343,-.4926,-1.453;-1.0856,-1.5759,-.8381;-2.3101,-2.1825,-1.963;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649476632989</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004694078522 0.000663712567 0.029202033715 0.005337147073</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029853277 -0.002380919 0.000129614 0.000145212 0.000200811 0.000233102 0.000289851 0.000334512 0.000508443 0.000559150 0.000692091 0.000765518 0.000776685 0.000806896 0.000846313 0.000946942 0.001062361 0.001094358 0.001140627 0.001228119 0.001259340 0.001342974 0.001474931 0.001621642 0.001679020 0.001989162 0.002086488 0.002210449 0.002244605 0.002380361 0.002645794 0.002996957 0.003286364 0.003759785 0.003838319 0.004026599 0.004419721 0.005063515 0.005428638 0.005671591 0.005894995 0.006104756 0.006512654 0.007205425 0.007599963 0.008047719 0.008415571 0.008870983 0.009395522 0.009871498 0.011042333 0.011623245 0.012766255 0.012933537 0.013300225 0.013767017 0.014492358 0.014880369 0.015196778 0.015435302 0.016060994 0.016570246 0.017264767 0.017624710 0.018072602 0.018524635 0.019414876 0.019921667 0.020737520 0.020864702 0.022015300 0.022817283 0.024117080 0.025852113 0.026341302 0.026804158 0.028275111 0.028779477 0.030676891 0.031389484 0.031854991 0.033338907 0.033704069 0.034112282 0.037110922 0.037420725 0.038496478 0.039104784 0.039207776 0.040782990 0.042796574 0.043703106 0.045156084 0.048308963 0.049064574 0.049456702 0.049983529 0.050982349 0.052111119 0.052332208 0.052390377 0.052571245 0.052960819 0.053397474 0.054051212 0.054692371 0.055109833 0.055865241 0.056364637 0.056465062 0.057072601 0.058275658 0.059348488 0.059888467 0.060675960 0.060879714 0.061490488 0.061780343 0.062270009 0.064897505 0.065659194 0.065804863 0.066496814 0.071550552 0.073773633 0.074639978 0.076892636 0.079692769 0.083597296 0.084946184 0.085081141 0.086252458 0.087074856 0.089654629 0.090630781 0.092769446 0.094496165 0.095531160 0.095565774 0.095858735 0.097137692 0.097375415 0.098210493 0.099147005 0.099483278 0.099930746 0.100992641 0.101491221 0.102436784 0.103051837 0.103726667 0.104376116 0.106042746 0.106584139 0.107009094 0.108442548 0.109629319 0.110688093 0.112266990 0.113101181 0.116619691 0.118489841 0.118648758 0.120969373 0.123402911 0.124630582 0.125804857 0.130399820 0.131554414 0.134766764 0.135742821 0.141681934 0.142324527 0.144877536 0.145780602 0.146529975 0.146980968 0.147127128 0.152474266 0.155513835 0.159446648 0.171730952 0.172543785 0.175448458 0.182664654 0.182816295 0.185930347 0.186596742 0.190699457 0.192518741 0.196448301 0.197627536 0.200045891 0.204705659 0.206586862 0.206750145 0.209610962 0.211782985 0.212242391 0.214678507 0.217845455 0.223860210 0.224691401 0.229628549 0.233549488 0.234248022 0.234835623 0.243241688 0.253252830 0.256500940 0.257007746 0.263685197 0.278130006 0.282224086 0.285977361 0.287675211 0.292011299 0.298914994 0.302510065 0.302988738 0.305131672 0.312615127 0.314545445 0.321350687 0.321416341 0.328633789 0.342840280 0.346471383 0.348943591 0.350263996 0.354287964 0.360730677 0.361463152 0.369756665 0.376342872 0.385717986 0.406145066 0.421725659 0.424543364 0.450440101 0.464730142 0.468599821 0.473516439 0.475582352 0.477525745 0.485702838 0.490700457 0.506526184 0.532194471 0.561922384 0.565310329 0.577875202 0.589948492 0.592148152 0.602523794 0.635371762 0.639050267 0.642997469 0.662131994 0.669857304 0.680361991 0.683654747 0.691229441 0.694172069 0.703812581 0.708130784 0.712632032 0.738073749 0.749898991 0.759264399 0.771834632 0.776582882 0.804068830 0.808669827 0.810876276 0.813145204 0.819747886 0.820455086 0.828960158 0.830317619 0.831393760 0.839529928 0.844138810 0.844903515 0.849379290 0.857133978 0.861455703 0.864591259 0.870260542 0.872166871 0.883197924 0.887375211 0.890963521 0.892886032 0.915824304 0.921906276 0.930285413 0.932079188 0.963730982 0.975140571 0.977440497 0.991797401 0.999311223 1.022814765 1.034893018 1.043841693 1.051179955 1.058180599 1.084943909 1.085517731 1.090667404 1.104726238 1.107308162 1.112041396 1.122573094 1.123477263 1.134991593 1.138954703 1.167953345 1.170543244 1.178783731 1.185466561 1.194051125 1.205136934 1.219878742 1.239985748 1.295226970 1.310270313 1.314219737 1.323705095 1.325275954 1.326451814 1.332904087 1.340340701 1.341695561 1.355360888 1.374673514 1.377085996 1.380457268 1.380935778 1.390010048 1.418343883 1.550977808 1.659892646 1.766489718</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">38</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36240045" y3="0.1246828" z3="-0.20808419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.42465666" y3="0.11108446" z3="0.35692266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.69030968" y3="0.41299785" z3="-0.39608014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79282899" y3="1.26761627" z3="-2.31389363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.42064163" y3="0.53828766" z3="-1.19615702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7533926" y3="0.92918966" z3="-3.66707632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.7180893" y3="1.80212223" z3="-3.19877048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.49154777" y3="2.69956467" z3="-4.68785748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59592434" y3="1.36455855" z3="-4.37831801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.62239723" y3="3.05845304" z3="-5.24795203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88331292" y3="-0.39827522" z3="-3.39519092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11212993" y3="0.2291652" z3="-0.98323327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38168409" y3="-0.94351777" z3="-1.92022395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91506307" y3="-0.79713144" z3="-1.72500949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08561728" y3="-2.26402175" z3="-1.73509426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.11280015" y3="-3.67720619" z3="0.69914643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.17275788" y3="-5.12272055" z3="-4.7575855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.08673511" y3="-4.9101459" z3="-3.71668758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.75826898" y3="-4.34462168" z3="-1.08669588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.90222148" y3="-4.47391877" z3="-2.83683061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.40226197" y3="-5.08852547" z3="-3.28356715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.7391656" y3="-4.80243301" z3="-1.96250213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.57827855" y3="-4.20354444" z3="-1.5051526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93340728" y3="-4.32430806" z3="-3.16511634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.17230798" y3="-5.42626882" z3="-3.98011595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.77519509" y3="-4.91441496" z3="-1.63378321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.98531602" y3="-3.94735621" z3="0.24390125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14074713" y3="-3.78621962" z3="0.87607394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.00692232" y3="-4.27379209" z3="0.42625983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15375541" y3="-3.66336153" z3="2.34347378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23969592" y3="-3.50219495" z3="5.14122877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33576006" y3="-3.95966865" z3="3.03770597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01571821" y3="-3.28704862" z3="3.07309764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0559631" y3="-3.20691235" z3="4.46189652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37697962" y3="-3.88274873" z3="4.42717099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.22800903" y3="-4.260582" z3="2.48151953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06911479" y3="-3.06789941" z3="2.57348243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.14845582" y3="-2.92970127" z3="5.00579605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30234092" y3="-4.12669884" z3="4.95616865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27033882" y3="-3.44766903" z3="6.23302844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45873704" y3="-3.81200177" z3="-0.57540931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20053223" y3="-3.25398248" z3="-1.00222455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49480152" y3="0.40234365" z3="-4.64204897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09948508" y3="-1.87829" z3="0.02274163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00243571" y3="-1.15653783" z3="1.2101542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.97981266" y3="-0.47605204" z3="1.60649415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.57610455" y3="0.51516032" z3="1.33082085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.73383386" y3="1.45778399" z3="-0.26669113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8756521" y3="-0.63336174" z3="1.45729941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.64818866" y3="1.65504451" z3="2.81553272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.01066041" y3="-1.21564936" z3="2.06876773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.86449464" y3="-0.6173168" z3="3.34665811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.38483159" y3="0.8333632" z3="-1.107409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.0760577" y3="2.34534582" z3="-0.21260725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.76565613" y3="1.81018589" z3="-0.44271094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.95983885" y3="-0.99681923" z3="2.49474739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.8058796" y3="-0.0987699" z3="1.19560985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79618448" y3="-1.4816794" z3="0.75842559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.65901969" y3="1.07861087" z3="3.75758797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.23899682" y3="2.31385335" z3="2.83455834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.54421761" y3="2.30065914" z3="2.79167956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.99953842" y3="-1.03686329" z3="3.88463685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.79079154" y3="-0.85194984" z3="3.88788148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.74880465" y3="0.47499341" z3="3.2535911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83313878" y3="-0.57936876" z3="0.9956331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.45690225" y3="-1.92540029" z3="0.91137015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7890541" y3="-2.54067245" z3="1.96336913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51368087" y3="-1.79550354" z3="3.10576511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93567937" y3="-0.47672277" z3="3.24742914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60332537" y3="0.12435775" z3="2.18520301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.61784734" y3="-2.46766815" z3="-0.02118165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.43445944" y3="-3.56871257" z3="1.88050378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64324053" y3="-2.37716182" z3="4.13256888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.70001904" y3="0.07482847" z3="4.1582445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90636239" y3="1.17240633" z3="2.25793422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79844777" y3="0.70884549" z3="-4.19743369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.82970969" y3="-0.21589111" z3="-4.30571599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.55903464" y3="-1.45074421" z3="-4.88156818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.29862045" y3="-1.76766556" z3="-5.37570123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.72614509" y3="-0.83991121" z3="-5.24561135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98321229" y3="1.66781546" z3="-3.70814418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83012681" y3="-0.00050377" z3="-3.93063377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.62327944" y3="-2.45441408" z3="-4.95451651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.12656254" y3="-2.74138218" z3="-5.84613875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.72781565" y3="-1.09372465" z3="-5.5961461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.23708748" y3="-1.64476219" z3="5.01403701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33685612" y3="-3.54637222" z3="4.0253802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.47754922" y3="-3.37825779" z3="-5.72484148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.58936818" y3="-2.30817613" z3="-4.23234278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.14049679" y3="1.05854368" z3="-1.58018477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1905007" y3="1.47589811" z3="-2.55768303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.52552108" y3="1.27478512" z3="-1.81736428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.96024609" y3="1.85521991" z3="-2.98361977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.24358762" y3="0.95628822" z3="-1.05534395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.02878085" y3="2.00906811" z3="-3.15823954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.67511277" y3="2.05523575" z3="-3.76367629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0212075" y3="2.23874763" z3="-3.97090231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96079801" y3="2.34470099" z3="-4.53780561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.37028911" y3="2.67756935" z3="-4.90992145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.57109805" y3="3.20386412" z3="-3.47365688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.46843131" y3="3.64000502" z3="-4.26636885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.45573842" y3="4.19332922" z3="-2.95867307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.29021199" y3="5.52329418" z3="-3.26408581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.27750682" y3="3.89001407" z3="-2.30801295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.98682361" y3="6.26187712" z3="-2.85722305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.33076668" y3="5.0215847" z3="-4.5749314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.22521623" y3="5.94580235" z3="-4.09458816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.48817685" y3="5.33696622" z3="-5.19811606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.1093558" y3="7.00565383" z3="-4.33805934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.45990065" y3="-2.40907815" z3="-0.36733861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.36318729" y3="-3.16427928" z3="-1.16532659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99917339" y3="-2.85332227" z3="0.48520418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0990862" y3="-1.60363456" z3="-0.77569149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15947704" y3="-1.51666538" z3="-1.09823669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34814995" y3="-0.4866103" z3="-1.44990856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08912954" y3="-1.57227585" z3="-0.84069965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.31830051" y3="-2.1760389" z3="-1.96302831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3624,.1247,-.2081;7.4247,.1111,.3569;6.6903,.413,-.3961;4.7928,1.2676,-2.3139;4.4206,.5383,-1.1962;2.7534,.9292,-3.6671;3.7181,1.8021,-3.1988;1.4915,2.6996,-4.6879;1.5959,1.3646,-4.3783;.6224,3.0585,-5.248;2.8833,-.3983,-3.3952;3.1121,.2292,-.9832;2.3817,-.9435,-1.9202;.9151,-.7971,-1.725;3.0856,-2.264,-1.7351;-.1128,-3.6772,.6991;.1728,-5.1227,-4.7576;-.0867,-4.9101,-3.7167;-.7583,-4.3446,-1.0867;.9022,-4.4739,-2.8368;-1.4023,-5.0885,-3.2836;-1.7392,-4.8024,-1.9625;.5783,-4.2035,-1.5052;1.9334,-4.3243,-3.1651;-2.1723,-5.4263,-3.9801;-2.7752,-4.9144,-1.6338;-.9853,-3.9474,.2439;-2.1407,-3.7862,.8761;-3.0069,-4.2738,.4263;-2.1538,-3.6634,2.3435;-2.2397,-3.5022,5.1412;-3.3358,-3.9597,3.0377;-1.0157,-3.287,3.0731;-1.056,-3.2069,4.4619;-3.377,-3.8827,4.4272;-4.228,-4.2606,2.4815;-.0691,-3.0679,2.5735;-.1485,-2.9297,5.0058;-4.3023,-4.1267,4.9562;-2.2703,-3.4477,6.233;1.4587,-3.812,-.5754;2.2005,-3.254,-1.0022;.4948,.4023,-4.642;-3.0995,-1.8783,.0227;-3.0024,-1.1565,1.2102;-1.9798,-.4761,1.6065;-.5761,.5152,1.3308;-.7338,1.4578,-.2667;.8757,-.6334,1.4573;-.6482,1.655,2.8155;-4.0107,-1.2156,2.0688;-3.8645,-.6173,3.3467;-.3848,.8334,-1.1074;-.0761,2.3453,-.2126;-1.7657,1.8102,-.4427;.9598,-.9968,2.4947;1.8059,-.0988,1.1956;.7962,-1.4817,.7584;-.659,1.0786,3.7576;.239,2.3139,2.8346;-1.5442,2.3007,2.7917;-2.9995,-1.0369,3.8846;-4.7908,-.8519,3.8879;-3.7488,.475,3.2536;4.8331,-.5794,.9956;4.4569,-1.9254,.9114;3.7891,-2.5407,1.9634;3.5137,-1.7955,3.1058;3.9357,-.4767,3.2474;4.6033,.1244,2.1852;4.6178,-2.4677,-.0212;3.4345,-3.5687,1.8805;2.6432,-2.3772,4.1326;3.7,.0748,4.1582;4.9064,1.1724,2.2579;-.7984,.7088,-4.1974;-1.8297,-.2159,-4.3057;-1.559,-1.4507,-4.8816;-.2986,-1.7677,-5.3757;.7261,-.8399,-5.2456;-.9832,1.6678,-3.7081;-2.8301,-.0005,-3.9306;-2.6233,-2.4544,-4.9545;-.1266,-2.7414,-5.8461;1.7278,-1.0937,-5.5961;2.2371,-1.6448,5.014;2.3369,-3.5464,4.0254;-2.4775,-3.3783,-5.7248;-3.5894,-2.3082,-4.2323;7.1405,1.0585,-1.5802;6.1905,1.4759,-2.5577;8.5255,1.2748,-1.8174;8.9602,1.8552,-2.9836;9.2436,.9563,-1.0553;10.0288,2.0091,-3.1582;6.6751,2.0552,-3.7637;8.0212,2.2387,-3.9709;5.9608,2.3447,-4.5378;8.3703,2.6776,-4.9099;3.5711,3.2039,-3.4737;2.4684,3.64,-4.2664;4.4557,4.1933,-2.9587;4.2902,5.5233,-3.2641;5.2775,3.89,-2.308;4.9868,6.2619,-2.8572;2.3308,5.0216,-4.5749;3.2252,5.9458,-4.0946;1.4882,5.337,-5.1981;3.1094,7.0057,-4.3381;-4.4599,-2.4091,-.3673;-4.3632,-3.1643,-1.1653;-4.9992,-2.8533,.4852;-5.0991,-1.6036,-.7757;-2.1595,-1.5167,-1.0982;-2.3481,-.4866,-1.4499;-1.0891,-1.5723,-.8407;-2.3183,-2.176,-1.963;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649545394834</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004222542872 0.000627050144 0.027655550806 0.005337247328</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029882325 -0.002191081 0.000136628 0.000146262 0.000201562 0.000239054 0.000290370 0.000335381 0.000508874 0.000559366 0.000699082 0.000765838 0.000786963 0.000810399 0.000853159 0.000947998 0.001078116 0.001107412 0.001164467 0.001230672 0.001259875 0.001343048 0.001503174 0.001624103 0.001682612 0.001995473 0.002086541 0.002210612 0.002244394 0.002380483 0.002646484 0.002997258 0.003286417 0.003759767 0.003839422 0.004028684 0.004429976 0.005067734 0.005428918 0.005672055 0.005896136 0.006107673 0.006513094 0.007206204 0.007600188 0.008053970 0.008415387 0.008872102 0.009396281 0.009871344 0.011042463 0.011623194 0.012766694 0.012933604 0.013300486 0.013767199 0.014494721 0.014880234 0.015196943 0.015435704 0.016060953 0.016570782 0.017274781 0.017625579 0.018077058 0.018525908 0.019417004 0.019928675 0.020737498 0.020864856 0.022017244 0.022817170 0.024118861 0.025852126 0.026341498 0.026804538 0.028275144 0.028779494 0.030677369 0.031389558 0.031856371 0.033339712 0.033707357 0.034152010 0.037110767 0.037421215 0.038620315 0.039140467 0.039237512 0.040785827 0.043007576 0.043710422 0.045156000 0.048320975 0.049065244 0.049457940 0.049983511 0.050982753 0.052112145 0.052332330 0.052391129 0.052571247 0.053333947 0.053415467 0.054056958 0.054696881 0.055110395 0.055871887 0.056364653 0.056465190 0.057073410 0.058279311 0.059411079 0.060142483 0.060702011 0.060927421 0.061497658 0.061782246 0.062273880 0.064898124 0.065660055 0.065804689 0.066551078 0.071580131 0.073774210 0.074654275 0.076892682 0.079743220 0.083597888 0.084952735 0.085089923 0.086254025 0.087077128 0.089655079 0.090641593 0.092772040 0.094497148 0.095557075 0.095730896 0.095922860 0.097374670 0.097538747 0.098211948 0.099186831 0.099653641 0.099950084 0.101062117 0.101501783 0.102452385 0.103068063 0.103726537 0.104376255 0.106043821 0.106594045 0.107153809 0.108444103 0.109632048 0.110692153 0.112268651 0.113114986 0.116630315 0.118512165 0.118743524 0.120969376 0.123402887 0.124637042 0.125805080 0.130399822 0.131554056 0.134766735 0.135738506 0.141696523 0.142337483 0.144924609 0.145798604 0.146531781 0.146988051 0.147196848 0.152477735 0.155512027 0.159446643 0.171770705 0.172543803 0.175485031 0.182667383 0.182884891 0.185930799 0.186596548 0.190702269 0.192518620 0.196465022 0.197628602 0.200046419 0.204705571 0.206748913 0.207085515 0.209610993 0.211873722 0.212248072 0.214678680 0.217865171 0.223860205 0.224701223 0.229655225 0.233553650 0.234257597 0.234835698 0.243243284 0.253306954 0.256501963 0.257030164 0.263748154 0.278130589 0.282224174 0.285977375 0.287708506 0.292011629 0.298918745 0.302512175 0.302996561 0.305131692 0.312628397 0.314546940 0.321351740 0.321416434 0.328641157 0.342840598 0.346471844 0.348943917 0.350264033 0.354290158 0.360730734 0.361463598 0.369756674 0.376355923 0.385720920 0.406176404 0.421727218 0.424543655 0.450440126 0.464753682 0.468600194 0.473517126 0.475583133 0.477593236 0.485702878 0.492208871 0.506532776 0.532210275 0.561933455 0.565312274 0.578167409 0.589948385 0.592148612 0.602538287 0.635373522 0.639051026 0.643144977 0.662132175 0.670059833 0.680362902 0.683654920 0.691229454 0.694172349 0.703812935 0.709444254 0.712783133 0.738104356 0.749901956 0.759264551 0.771835701 0.776584019 0.804068925 0.808670064 0.810877106 0.813145207 0.819783886 0.820455803 0.828960790 0.830381596 0.831395178 0.839534386 0.844138769 0.844903590 0.849379312 0.857136220 0.861455750 0.864591468 0.870261310 0.872166838 0.883197979 0.887375204 0.890964334 0.892902887 0.915824409 0.921908565 0.930286183 0.932079302 0.963735038 0.975160091 0.977927221 0.992376511 0.999329868 1.022894093 1.035284204 1.044028127 1.051285924 1.058273153 1.085128756 1.085617979 1.091871604 1.104726402 1.107614417 1.112043818 1.122584087 1.123483578 1.134991759 1.138955451 1.168223396 1.170543580 1.178806318 1.185466576 1.194051777 1.205926831 1.219878734 1.239986077 1.295239609 1.310272104 1.314248513 1.323725865 1.325277425 1.326452078 1.332904246 1.340340803 1.341695514 1.355360927 1.374673505 1.377090232 1.380462466 1.380935724 1.390353090 1.418346922 1.550977822 1.659892641 1.766493263</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">39</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.36108871" y3="0.12391748" z3="-0.20755964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.42300991" y3="0.11264671" z3="0.35862741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.68872459" y3="0.41404603" z3="-0.39464225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79123198" y3="1.26758666" z3="-2.31286606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41930312" y3="0.53686887" z3="-1.19591052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75250611" y3="0.92856923" z3="-3.66646996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.71631309" y3="1.80178646" z3="-3.19765218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.48875427" y3="2.69826502" z3="-4.6862883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59463118" y3="1.36373387" z3="-4.376921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.61964817" y3="3.05601555" z3="-5.24718184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88379241" y3="-0.39917529" z3="-3.39603886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11108103" y3="0.22618346" z3="-0.98368038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3811224" y3="-0.94583335" z3="-1.92205426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91434497" y3="-0.79945981" z3="-1.72791652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08459375" y3="-2.26662925" z3="-1.73719992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.11513081" y3="-3.67481907" z3="0.69842262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.16462653" y3="-5.12214657" z3="-4.75816049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.09369589" y3="-4.9089307" z3="-3.717179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.76268074" y3="-4.34139497" z3="-1.08706523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.89642523" y3="-4.47393045" z3="-2.83814991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.40922145" y3="-5.08494717" z3="-3.283155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.74488728" y3="-4.79764826" z3="-1.96207391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.57376598" y3="-4.20265969" z3="-1.50636576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92753593" y3="-4.32599917" z3="-3.16718132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.18032258" y3="-5.42125601" z3="-3.97929171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.78091009" y3="-4.90752652" z3="-1.6328643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.98827026" y3="-3.94380121" z3="0.24372332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14271357" y3="-3.78282668" z3="0.8771633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.00992996" y3="-4.26856751" z3="0.4270133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15513211" y3="-3.66042662" z3="2.34432513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23961131" y3="-3.50120084" z3="5.14214927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33742876" y3="-3.95497546" z3="3.03883794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01610178" y3="-3.2868612" z3="3.07367347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05561711" y3="-3.2077046" z3="4.46250927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37791748" y3="-3.87899969" z3="4.42834021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.23045782" y3="-4.25386619" z3="2.48290142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06927121" y3="-3.06939682" z3="2.57379986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1473725" y3="-2.93271072" z3="5.00620321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30350872" y3="-4.12158961" z3="4.95755298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26966769" y3="-3.44749211" z3="6.23398977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45532665" y3="-3.81248327" z3="-0.57725367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19796449" y3="-3.25586117" z3="-1.00440958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49634137" y3="0.39878911" z3="-4.64476149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10183293" y3="-1.8722256" z3="0.02488124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-3.00109155" y3="-1.15130744" z3="1.21238152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.97691321" y3="-0.47181407" z3="1.60680252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.57133061" y3="0.51591913" z3="1.33012982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.72753477" y3="1.45905983" z3="-0.26722674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.87761541" y3="-0.63604278" z3="1.45551227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.63934988" y3="1.65598499" z3="2.81489363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.00766528" y3="-1.20938328" z3="2.07324093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.85817034" y3="-0.61161221" z3="3.35089567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.38156908" y3="0.83344667" z3="-1.10826151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.06660844" y3="2.34423547" z3="-0.21399268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.75825595" y3="1.81502365" z3="-0.44210991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.96078524" y3="-1.00086695" z3="2.49254266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.80909801" y3="-0.10333089" z3="1.19457113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79627235" y3="-1.48331692" z3="0.75564407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.65052536" y3="1.07960218" z3="3.75697574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.2493165" y3="2.3127824" z3="2.83298829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.53392194" y3="2.30359617" z3="2.7919402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.99290772" y3="-1.03249915" z3="3.88720362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.783785" y3="-0.84502103" z3="3.89382562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.74105812" y3="0.48054791" z3="3.25791568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83225988" y3="-0.5810455" z3="0.99578467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.45510193" y3="-1.92675858" z3="0.91049659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78789898" y3="-2.54269883" z3="1.96249732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51396952" y3="-1.79852116" z3="3.10587671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93683799" y3="-0.48013474" z3="3.24846642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60395036" y3="0.12160232" z3="2.18626857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.61477554" y3="-2.46816248" z3="-0.02277834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.43262548" y3="-3.57044351" z3="1.87893791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64395011" y3="-2.38062589" z3="4.13278344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.70226988" y3="0.07064889" z3="4.1600155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90768686" y3="1.16938853" z3="2.25979514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79775027" y3="0.6975326" z3="-4.19551619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.82502286" y3="-0.23158851" z3="-4.30636029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.54767265" y3="-1.46255434" z3="-4.89516049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.28664085" y3="-1.77147543" z3="-5.3984096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.73460748" y3="-0.83977551" z3="-5.2605835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98652718" y3="1.65401136" z3="-3.70013115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82699432" y3="-0.02389422" z3="-3.92716369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.60758456" y3="-2.47166791" z3="-4.96923228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.11750326" y3="-2.74110001" z3="-5.85691548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.73835385" y3="-1.08663643" z3="-5.61118538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.23889042" y3="-1.64885893" z3="5.01520546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33677505" y3="-3.5495274" z3="4.02472221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.46045525" y3="-3.38974048" z3="-5.74704269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.57191937" y3="-2.33583168" z3="-4.24096729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.13876589" y3="1.06082821" z3="-1.57810159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.18875409" y3="1.47773589" z3="-2.55576872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.52364093" y3="1.27884609" z3="-1.81444999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.95823151" y3="1.86062131" z3="-2.98007466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.24172018" y3="0.96063884" z3="-1.0523209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.0266633" y3="2.01581014" z3="-3.15408444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.67324259" y3="2.05858226" z3="-3.76106377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.01921124" y3="2.24381544" z3="-3.96750435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95894007" y3="2.34780706" z3="-4.53529328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.36822199" y3="2.68376678" z3="-4.90601089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.56769552" y3="3.20345877" z3="-3.47164279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.46473617" y3="3.63897787" z3="-4.26432819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.45076566" y3="4.19349705" z3="-2.95534575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.2834245" y3="5.52352571" z3="-3.25934547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.27255422" y3="3.89061829" z3="-2.30452991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.97861087" y3="6.26270884" z3="-2.85114058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.32551597" y3="5.02038091" z3="-4.5719059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.21832194" y3="5.94532602" z3="-4.09001063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.48272898" y3="5.33513656" z3="-5.19513699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.10086003" y3="7.00527549" z3="-4.33219132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46330775" y3="-2.40237924" z3="-0.36173183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.36889756" y3="-3.15762804" z3="-1.15986315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00087755" y3="-2.84631428" z3="0.49205149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10296365" y3="-1.59651535" z3="-0.76836593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16388254" y3="-1.51176494" z3="-1.09818837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35013768" y3="-0.47973171" z3="-1.44659816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09255229" y3="-1.57171082" z3="-0.84398036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.32805619" y3="-2.16885538" z3="-1.96420948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3611,.1239,-.2076;7.423,.1126,.3586;6.6887,.414,-.3946;4.7912,1.2676,-2.3129;4.4193,.5369,-1.1959;2.7525,.9286,-3.6665;3.7163,1.8018,-3.1977;1.4888,2.6983,-4.6863;1.5946,1.3637,-4.3769;.6196,3.056,-5.2472;2.8838,-.3992,-3.396;3.1111,.2262,-.9837;2.3811,-.9458,-1.9221;.9143,-.7995,-1.7279;3.0846,-2.2666,-1.7372;-.1151,-3.6748,.6984;.1646,-5.1221,-4.7582;-.0937,-4.9089,-3.7172;-.7627,-4.3414,-1.0871;.8964,-4.4739,-2.8381;-1.4092,-5.0849,-3.2832;-1.7449,-4.7976,-1.9621;.5738,-4.2027,-1.5064;1.9275,-4.326,-3.1672;-2.1803,-5.4213,-3.9793;-2.7809,-4.9075,-1.6329;-.9883,-3.9438,.2437;-2.1427,-3.7828,.8772;-3.0099,-4.2686,.427;-2.1551,-3.6604,2.3443;-2.2396,-3.5012,5.1421;-3.3374,-3.955,3.0388;-1.0161,-3.2869,3.0737;-1.0556,-3.2077,4.4625;-3.3779,-3.879,4.4283;-4.2305,-4.2539,2.4829;-.0693,-3.0694,2.5738;-.1474,-2.9327,5.0062;-4.3035,-4.1216,4.9576;-2.2697,-3.4475,6.234;1.4553,-3.8125,-.5773;2.198,-3.2559,-1.0044;.4963,.3988,-4.6448;-3.1018,-1.8722,.0249;-3.0011,-1.1513,1.2124;-1.9769,-.4718,1.6068;-.5713,.5159,1.3301;-.7275,1.4591,-.2672;.8776,-.636,1.4555;-.6393,1.656,2.8149;-4.0077,-1.2094,2.0732;-3.8582,-.6116,3.3509;-.3816,.8334,-1.1083;-.0666,2.3442,-.214;-1.7583,1.815,-.4421;.9608,-1.0009,2.4925;1.8091,-.1033,1.1946;.7963,-1.4833,.7556;-.6505,1.0796,3.757;.2493,2.3128,2.833;-1.5339,2.3036,2.7919;-2.9929,-1.0325,3.8872;-4.7838,-.845,3.8938;-3.7411,.4805,3.2579;4.8323,-.581,.9958;4.4551,-1.9268,.9105;3.7879,-2.5427,1.9625;3.514,-1.7985,3.1059;3.9368,-.4801,3.2485;4.604,.1216,2.1863;4.6148,-2.4682,-.0228;3.4326,-3.5704,1.8789;2.644,-2.3806,4.1328;3.7023,.0706,4.16;4.9077,1.1694,2.2598;-.7978,.6975,-4.1955;-1.825,-.2316,-4.3064;-1.5477,-1.4626,-4.8952;-.2866,-1.7715,-5.3984;.7346,-.8398,-5.2606;-.9865,1.654,-3.7001;-2.827,-.0239,-3.9272;-2.6076,-2.4717,-4.9692;-.1175,-2.7411,-5.8569;1.7384,-1.0866,-5.6112;2.2389,-1.6489,5.0152;2.3368,-3.5495,4.0247;-2.4605,-3.3897,-5.747;-3.5719,-2.3358,-4.241;7.1388,1.0608,-1.5781;6.1888,1.4777,-2.5558;8.5236,1.2788,-1.8144;8.9582,1.8606,-2.9801;9.2417,.9606,-1.0523;10.0267,2.0158,-3.1541;6.6732,2.0586,-3.7611;8.0192,2.2438,-3.9675;5.9589,2.3478,-4.5353;8.3682,2.6838,-4.906;3.5677,3.2035,-3.4716;2.4647,3.639,-4.2643;4.4508,4.1935,-2.9553;4.2834,5.5235,-3.2593;5.2726,3.8906,-2.3045;4.9786,6.2627,-2.8511;2.3255,5.0204,-4.5719;3.2183,5.9453,-4.09;1.4827,5.3351,-5.1951;3.1009,7.0053,-4.3322;-4.4633,-2.4024,-.3617;-4.3689,-3.1576,-1.1599;-5.0009,-2.8463,.4921;-5.103,-1.5965,-.7684;-2.1639,-1.5118,-1.0982;-2.3501,-.4797,-1.4466;-1.0926,-1.5717,-.844;-2.3281,-2.1689,-1.9642;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649607770951</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003971453626 0.000622862634 0.022058146353 0.005337407752</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029892054 -0.002236387 0.000139118 0.000146677 0.000203411 0.000253798 0.000291847 0.000337155 0.000509325 0.000559430 0.000705269 0.000766693 0.000797779 0.000816158 0.000863296 0.000948797 0.001083153 0.001117080 0.001211951 0.001253573 0.001271340 0.001343151 0.001571833 0.001636027 0.001707327 0.002022738 0.002089112 0.002211302 0.002248454 0.002380491 0.002649064 0.002998072 0.003286445 0.003759739 0.003842564 0.004033718 0.004460414 0.005079315 0.005429290 0.005672637 0.005899956 0.006118264 0.006514501 0.007207914 0.007600095 0.008068003 0.008418036 0.008881285 0.009406373 0.009871236 0.011042585 0.011623172 0.012766834 0.012933913 0.013300965 0.013767045 0.014495848 0.014880454 0.015197271 0.015435863 0.016060838 0.016570785 0.017275416 0.017626761 0.018079234 0.018526116 0.019439265 0.019932125 0.020737979 0.020867331 0.022033017 0.022819539 0.024124353 0.025852148 0.026341487 0.026806750 0.028275163 0.028779491 0.030677336 0.031389541 0.031856341 0.033339818 0.033707489 0.034152764 0.037111319 0.037423145 0.038671907 0.039150197 0.039261945 0.040787116 0.043108170 0.043714462 0.045156331 0.048328395 0.049065780 0.049458734 0.049983490 0.050982888 0.052112590 0.052332371 0.052391377 0.052571235 0.053388276 0.053579802 0.054062562 0.054698526 0.055111853 0.055883007 0.056364699 0.056465160 0.057073338 0.058279082 0.059427575 0.060265222 0.060719911 0.060968331 0.061496439 0.061783389 0.062276490 0.064898381 0.065662123 0.065805235 0.066591602 0.071611113 0.073774887 0.074672277 0.076892672 0.079825894 0.083601515 0.084965155 0.085113818 0.086255075 0.087087599 0.089655180 0.090646228 0.092778624 0.094497673 0.095557499 0.095794799 0.096108921 0.097375175 0.097966736 0.098218163 0.099212034 0.099846145 0.100083601 0.101199402 0.101536637 0.102477624 0.103095583 0.103726478 0.104376328 0.106044210 0.106599000 0.107290431 0.108444490 0.109634810 0.110694812 0.112270639 0.113122106 0.116642437 0.118518811 0.118804631 0.120969375 0.123402811 0.124638038 0.125805061 0.130399978 0.131553881 0.134767039 0.135751812 0.141721452 0.142354364 0.145018388 0.145847000 0.146533359 0.147000189 0.147629562 0.152501812 0.155582802 0.159449199 0.171837833 0.172544194 0.175528673 0.182667656 0.182907328 0.185931003 0.186597384 0.190715168 0.192518151 0.196486126 0.197634525 0.200046086 0.204705720 0.206749142 0.207581582 0.209611008 0.211881851 0.212292885 0.214681147 0.217904469 0.223860822 0.224717649 0.229672588 0.233561370 0.234269894 0.234836744 0.243248801 0.253360734 0.256504419 0.257124992 0.263801263 0.278136505 0.282224344 0.285977371 0.287724272 0.292012274 0.298919151 0.302561507 0.303000131 0.305131734 0.312629360 0.314546979 0.321361155 0.321416428 0.328640868 0.342843853 0.346474220 0.348943981 0.350265436 0.354292277 0.360730727 0.361464190 0.369756660 0.376355807 0.385720927 0.406178000 0.421728256 0.424549322 0.450440169 0.464769146 0.468600589 0.473528616 0.475583701 0.477639170 0.485704420 0.492868305 0.506534983 0.532224374 0.561939898 0.565313627 0.578347564 0.589949366 0.592148870 0.602551035 0.635375154 0.639057713 0.643246295 0.662132196 0.670207080 0.680363474 0.683654913 0.691229455 0.694184178 0.703813108 0.710682122 0.713077635 0.738130677 0.749905095 0.759264773 0.771836999 0.776584900 0.804068994 0.808670112 0.810878929 0.813145203 0.819808534 0.820457313 0.828962299 0.830421792 0.831396719 0.839534377 0.844138766 0.844903591 0.849379298 0.857136396 0.861459121 0.864591490 0.870262289 0.872174242 0.883198007 0.887375465 0.890964366 0.892971821 0.915827259 0.921915208 0.930289208 0.932079996 0.963738626 0.975174504 0.978715497 0.993334898 0.999362504 1.022991152 1.035753332 1.044269038 1.051419674 1.058371878 1.085205919 1.085724846 1.092935949 1.104726986 1.107844494 1.112045449 1.122595164 1.123490039 1.134991906 1.138956219 1.168489910 1.170543888 1.178827750 1.185466751 1.194052280 1.206520134 1.219878737 1.239986215 1.295246793 1.310271218 1.314256153 1.323727537 1.325278414 1.326452550 1.332904352 1.340340806 1.341695519 1.355360952 1.374673492 1.377120869 1.380464872 1.380935695 1.390391120 1.418347799 1.550977802 1.659892636 1.766552776</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">40</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.35960774" y3="0.12323923" z3="-0.20679454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.42122959" y3="0.11475196" z3="0.3605853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6869314" y3="0.41561967" z3="-0.39288646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78926251" y3="1.26804049" z3="-2.31124261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41773343" y3="0.53555341" z3="-1.19534277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75309658" y3="0.92611503" z3="-3.66828826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.71413803" y3="1.80122062" z3="-3.19637193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.48700352" y3="2.69472879" z3="-4.68729999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59636976" y3="1.35882349" z3="-4.38221884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.61759103" y3="3.0518897" z3="-5.24806945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88558083" y3="-0.40137425" z3="-3.39760076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10979548" y3="0.22293616" z3="-0.98425479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38089433" y3="-0.94848842" z3="-1.92435374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91396059" y3="-0.80177926" z3="-1.73128155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08370428" y3="-2.26958547" z3="-1.73939679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1177952" y3="-3.67229939" z3="0.69732664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.15530861" y3="-5.12076581" z3="-4.75960233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.10170217" y3="-4.90697245" z3="-3.71837695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.7676062" y3="-4.33777574" z3="-1.08780441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.89010772" y3="-4.47403636" z3="-2.83999619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.41736277" y3="-5.08007757" z3="-3.28343782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.75148158" y3="-4.79187051" z3="-1.96217602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.56895386" y3="-4.20196272" z3="-1.50802928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92140389" y3="-4.32836549" z3="-3.16975534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.18990949" y3="-5.41411281" z3="-3.97924217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.78771394" y3="-4.89902601" z3="-1.63247562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.99163917" y3="-3.93978308" z3="0.24310143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14576595" y3="-3.77743435" z3="0.87719461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.01331821" y3="-4.26302057" z3="0.427854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15678023" y3="-3.65696401" z3="2.34483179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23897926" y3="-3.50067632" z3="5.14306239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33905759" y3="-3.95017174" z3="3.03991201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0164533" y3="-3.28666628" z3="3.07393242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05483964" y3="-3.20892643" z3="4.46293503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37848561" y3="-3.87553705" z3="4.42955853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.23304991" y3="-4.24700092" z3="2.48436045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06939017" y3="-3.07091894" z3="2.5737503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.14563091" y3="-2.93642989" z3="5.00635989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.304202" y3="-4.11693243" z3="4.95909807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26820495" y3="-3.44801113" z3="6.23499634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45214402" y3="-3.81370751" z3="-0.57939631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19534085" y3="-3.25832318" z3="-1.00683339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50137353" y3="0.39111068" z3="-4.65430995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.1034871" y3="-1.86711985" z3="0.02805796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9997211" y3="-1.14568765" z3="1.21521412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.97428234" y3="-0.46697703" z3="1.60709356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.56576418" y3="0.51679802" z3="1.3294875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.72036753" y3="1.46035267" z3="-0.26771431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.87991722" y3="-0.63939005" z3="1.4535369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.62951389" y3="1.65678952" z3="2.81450708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.00450175" y3="-1.20254836" z3="2.07802758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.85118201" y3="-0.60571356" z3="3.35585082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.37802426" y3="0.83307695" z3="-1.10908184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.05523499" y3="2.34263778" z3="-0.21542247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.74985296" y3="1.82097073" z3="-0.44119391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.96205887" y3="-1.00585431" z3="2.4900771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.81277206" y3="-0.10863281" z3="1.19346058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.7964165" y3="-1.48543317" z3="0.75236251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.64109393" y3="1.08027576" z3="3.75651077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.26086612" y3="2.31134767" z3="2.83176452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.52250364" y3="2.30668706" z3="2.79262431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.98533572" y3="-1.02852463" z3="3.88990701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.7759919" y3="-0.83787992" z3="3.90069274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.73237048" y3="0.48630539" z3="3.26322663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8313609" y3="-0.58297043" z3="0.99603433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.45318438" y3="-1.92832604" z3="0.90938463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78672808" y3="-2.54514943" z3="1.96133334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51448842" y3="-1.80220979" z3="3.10595938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93832932" y3="-0.4842613" z3="3.24978554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60478968" y3="0.11835002" z3="2.18766206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.61137338" y3="-2.46862696" z3="-0.02482325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.43065649" y3="-3.57255254" z3="1.87682373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64496857" y3="-2.38494756" z3="4.13293263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.70501849" y3="0.0655527" z3="4.16226142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.90931923" y3="1.16584761" z3="2.26217965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79289416" y3="0.68484117" z3="-4.2055176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.81725769" y3="-0.24628232" z3="-4.31819526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.53886415" y3="-1.47401948" z3="-4.90150477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.27767092" y3="-1.77747033" z3="-5.40072275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.74026106" y3="-0.84427539" z3="-5.2659761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98455783" y3="1.63815418" z3="-3.70535405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81796705" y3="-0.04177227" z3="-3.93758611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.59440272" y3="-2.48619909" z3="-4.97925691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.10069851" y3="-2.74539731" z3="-5.87600357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.74306149" y3="-1.08796533" z3="-5.61915278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.24137683" y3="-1.65398479" z3="5.01674804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33667909" y3="-3.55347798" z3="4.02353754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.44472445" y3="-3.40000391" z3="-5.76102713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.55747676" y3="-2.35788983" z3="-4.2494672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1367095" y3="1.06405095" z3="-1.5755527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.18659" y3="1.48051483" z3="-2.55329106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.52140401" y3="1.28423155" z3="-1.81104518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.95573593" y3="1.8677113" z3="-2.97593682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.23956372" y3="0.96630097" z3="-1.04887545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.02404428" y3="2.02454582" z3="-3.14931248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.67082021" y3="2.06322571" z3="-3.75781403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.01664363" y3="2.2505374" z3="-3.96344855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95646913" y3="2.35214723" z3="-4.53211963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.36549954" y3="2.69185118" z3="-4.90138712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.56305878" y3="3.20310512" z3="-3.46852319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.45975292" y3="3.63765862" z3="-4.26128384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.44420111" y3="4.19411426" z3="-2.95053726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.27472434" y3="5.5242709" z3="-3.25294584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.2664706" y3="3.89176924" z3="-2.3000237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.96867439" y3="6.26406911" z3="-2.84377683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.31802691" y3="5.01950968" z3="-4.56672151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.20911409" y3="5.94537679" z3="-4.08338329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.4752257" y3="5.33359836" z3="-5.19025486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.0901752" y3="7.005379" z3="-4.32454722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46676691" y3="-2.39514219" z3="-0.35568486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.37526197" y3="-3.15042303" z3="-1.1542639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00294111" y3="-2.83861506" z3="0.49919964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10645775" y3="-1.58820903" z3="-0.76033026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16843592" y3="-1.50608581" z3="-1.09745241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35463086" y3="-0.47419305" z3="-1.44424802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09720593" y3="-1.56663374" z3="-0.84625558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.33458769" y3="-2.16147655" z3="-1.96328817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3596,.1232,-.2068;7.4212,.1148,.3606;6.6869,.4156,-.3929;4.7893,1.268,-2.3112;4.4177,.5356,-1.1953;2.7531,.9261,-3.6683;3.7141,1.8012,-3.1964;1.487,2.6947,-4.6873;1.5964,1.3588,-4.3822;.6176,3.0519,-5.2481;2.8856,-.4014,-3.3976;3.1098,.2229,-.9843;2.3809,-.9485,-1.9244;.914,-.8018,-1.7313;3.0837,-2.2696,-1.7394;-.1178,-3.6723,.6973;.1553,-5.1208,-4.7596;-.1017,-4.907,-3.7184;-.7676,-4.3378,-1.0878;.8901,-4.474,-2.84;-1.4174,-5.0801,-3.2834;-1.7515,-4.7919,-1.9622;.569,-4.202,-1.508;1.9214,-4.3284,-3.1698;-2.1899,-5.4141,-3.9792;-2.7877,-4.899,-1.6325;-.9916,-3.9398,.2431;-2.1458,-3.7774,.8772;-3.0133,-4.263,.4279;-2.1568,-3.657,2.3448;-2.239,-3.5007,5.1431;-3.3391,-3.9502,3.0399;-1.0165,-3.2867,3.0739;-1.0548,-3.2089,4.4629;-3.3785,-3.8755,4.4296;-4.233,-4.247,2.4844;-.0694,-3.0709,2.5738;-.1456,-2.9364,5.0064;-4.3042,-4.1169,4.9591;-2.2682,-3.448,6.235;1.4521,-3.8137,-.5794;2.1953,-3.2583,-1.0068;.5014,.3911,-4.6543;-3.1035,-1.8671,.0281;-2.9997,-1.1457,1.2152;-1.9743,-.467,1.6071;-.5658,.5168,1.3295;-.7204,1.4604,-.2677;.8799,-.6394,1.4535;-.6295,1.6568,2.8145;-4.0045,-1.2025,2.078;-3.8512,-.6057,3.3559;-.378,.8331,-1.1091;-.0552,2.3426,-.2154;-1.7499,1.821,-.4412;.9621,-1.0059,2.4901;1.8128,-.1086,1.1935;.7964,-1.4854,.7524;-.6411,1.0803,3.7565;.2609,2.3113,2.8318;-1.5225,2.3067,2.7926;-2.9853,-1.0285,3.8899;-4.776,-.8379,3.9007;-3.7324,.4863,3.2632;4.8314,-.583,.996;4.4532,-1.9283,.9094;3.7867,-2.5451,1.9613;3.5145,-1.8022,3.106;3.9383,-.4843,3.2498;4.6048,.1184,2.1877;4.6114,-2.4686,-.0248;3.4307,-3.5726,1.8768;2.645,-2.3849,4.1329;3.705,.0656,4.1623;4.9093,1.1658,2.2622;-.7929,.6848,-4.2055;-1.8173,-.2463,-4.3182;-1.5389,-1.474,-4.9015;-.2777,-1.7775,-5.4007;.7403,-.8443,-5.266;-.9846,1.6382,-3.7054;-2.818,-.0418,-3.9376;-2.5944,-2.4862,-4.9793;-.1007,-2.7454,-5.876;1.7431,-1.088,-5.6192;2.2414,-1.654,5.0167;2.3367,-3.5535,4.0235;-2.4447,-3.4,-5.761;-3.5575,-2.3579,-4.2495;7.1367,1.0641,-1.5756;6.1866,1.4805,-2.5533;8.5214,1.2842,-1.811;8.9557,1.8677,-2.9759;9.2396,.9663,-1.0489;10.024,2.0245,-3.1493;6.6708,2.0632,-3.7578;8.0166,2.2505,-3.9634;5.9565,2.3521,-4.5321;8.3655,2.6919,-4.9014;3.5631,3.2031,-3.4685;2.4598,3.6377,-4.2613;4.4442,4.1941,-2.9505;4.2747,5.5243,-3.2529;5.2665,3.8918,-2.3;4.9687,6.2641,-2.8438;2.318,5.0195,-4.5667;3.2091,5.9454,-4.0834;1.4752,5.3336,-5.1903;3.0902,7.0054,-4.3245;-4.4668,-2.3951,-.3557;-4.3753,-3.1504,-1.1543;-5.0029,-2.8386,.4992;-5.1065,-1.5882,-.7603;-2.1684,-1.5061,-1.0975;-2.3546,-.4742,-1.4442;-1.0972,-1.5666,-.8463;-2.3346,-2.1615,-1.9633;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649668537435</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004448121260 0.000612244009 0.025177993857 0.005337764242</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029894604 -0.002198300 0.000141522 0.000148012 0.000203444 0.000256582 0.000292112 0.000338833 0.000509747 0.000559446 0.000707435 0.000766831 0.000798795 0.000819019 0.000868165 0.000950020 0.001083551 0.001117869 0.001216211 0.001257191 0.001302739 0.001343339 0.001597177 0.001651014 0.001775357 0.002064453 0.002107680 0.002211971 0.002262829 0.002380760 0.002649375 0.002999695 0.003286608 0.003759716 0.003847123 0.004036823 0.004496752 0.005110409 0.005430406 0.005674549 0.005913540 0.006137487 0.006517249 0.007210608 0.007600034 0.008089625 0.008428659 0.008895221 0.009429614 0.009871119 0.011043078 0.011623125 0.012766852 0.012934325 0.013301522 0.013766767 0.014496433 0.014880789 0.015197887 0.015436056 0.016060717 0.016571899 0.017275941 0.017628423 0.018079765 0.018530121 0.019487273 0.019980360 0.020738716 0.020874667 0.022071467 0.022829158 0.024135644 0.025852321 0.026341484 0.026812253 0.028275452 0.028779626 0.030677682 0.031389593 0.031856914 0.033339806 0.033707847 0.034160565 0.037114921 0.037427720 0.038688012 0.039151312 0.039267519 0.040787498 0.043132103 0.043714872 0.045157312 0.048331633 0.049066158 0.049458978 0.049983493 0.050982905 0.052112760 0.052332395 0.052391526 0.052571230 0.053391272 0.053681260 0.054066190 0.054698489 0.055113745 0.055897102 0.056364748 0.056465308 0.057074192 0.058281693 0.059430504 0.060293698 0.060724785 0.060976091 0.061511931 0.061783311 0.062277270 0.064898385 0.065663500 0.065807632 0.066612367 0.071637210 0.073775928 0.074691951 0.076892598 0.079931736 0.083608064 0.084977798 0.085163130 0.086255948 0.087110636 0.089657830 0.090647448 0.092825640 0.094497974 0.095557553 0.095809491 0.096317930 0.097375400 0.098189737 0.098331273 0.099226823 0.099888858 0.100361283 0.101371223 0.101707256 0.102533777 0.103149215 0.103726493 0.104376288 0.106044179 0.106601638 0.107417984 0.108444438 0.109637255 0.110694968 0.112272398 0.113124542 0.116656171 0.118522020 0.118823812 0.120969372 0.123403257 0.124638222 0.125805178 0.130400422 0.131553996 0.134767961 0.135826674 0.141743244 0.142366594 0.145088933 0.145890077 0.146533261 0.147004142 0.148455500 0.152555542 0.155809087 0.159456282 0.171917650 0.172545544 0.175573256 0.182667702 0.182911253 0.185932751 0.186600094 0.190740541 0.192517663 0.196504886 0.197642296 0.200045737 0.204706588 0.206749178 0.207962332 0.209611023 0.211887824 0.212370001 0.214687967 0.217955954 0.223861785 0.224741467 0.229679889 0.233569035 0.234282174 0.234838271 0.243263422 0.253422135 0.256507112 0.257333363 0.263842897 0.278151074 0.282224487 0.285977370 0.287729413 0.292016461 0.298931540 0.302685410 0.303008763 0.305131800 0.312631238 0.314547446 0.321391292 0.321416433 0.328651009 0.342851423 0.346478044 0.348944073 0.350268384 0.354294613 0.360730738 0.361465341 0.369757164 0.376365699 0.385725454 0.406184135 0.421728647 0.424558331 0.450440187 0.464778868 0.468600625 0.473545925 0.475583980 0.477667532 0.485705670 0.492976075 0.506534906 0.532239556 0.561943630 0.565313785 0.578463662 0.589953754 0.592149232 0.602559113 0.635379072 0.639064485 0.643315544 0.662132467 0.670309739 0.680364656 0.683654916 0.691229460 0.694196700 0.703813192 0.711610044 0.713765522 0.738153038 0.749908383 0.759265179 0.771838629 0.776585739 0.804069388 0.808670244 0.810882966 0.813145197 0.819826254 0.820459057 0.828963435 0.830445991 0.831398861 0.839534821 0.844139043 0.844903596 0.849379300 0.857136414 0.861463605 0.864591889 0.870265699 0.872203164 0.883198021 0.887375834 0.890964343 0.893097136 0.915833581 0.921926413 0.930293073 0.932081389 0.963742605 0.975183167 0.979691912 0.994738059 0.999426102 1.023102217 1.036292356 1.044565272 1.051588914 1.058479799 1.085240278 1.085811410 1.093735874 1.104727937 1.107963052 1.112045996 1.122604922 1.123495963 1.134992031 1.138956384 1.168733269 1.170544230 1.178846695 1.185467129 1.194052568 1.206887726 1.219878799 1.239986949 1.295250881 1.310276850 1.314256287 1.323733884 1.325278624 1.326452671 1.332904396 1.340340872 1.341695599 1.355360951 1.374673523 1.377299653 1.380467988 1.380935938 1.390398751 1.418347847 1.550977858 1.659892635 1.766558409</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">41</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3582438" y3="0.12247188" z3="-0.2062382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.41948848" y3="0.11651375" z3="0.36246046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.68526617" y3="0.41680815" z3="-0.39131898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78763204" y3="1.26774962" z3="-2.31033967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41636587" y3="0.53399135" z3="-1.19517439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7523155" y3="0.92508969" z3="-3.66791845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.71244599" y3="1.80036742" z3="-3.19568991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.48473073" y3="2.69248828" z3="-4.68687761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59483062" y3="1.35794542" z3="-4.38037712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.61546431" y3="3.04847649" z3="-5.24866561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88640882" y3="-0.40265535" z3="-3.39852273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10875461" y3="0.2197257" z3="-0.98485359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38042344" y3="-0.95109574" z3="-1.92628696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91332036" y3="-0.80419297" z3="-1.7345137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08263784" y3="-2.27250518" z3="-1.74142851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12026148" y3="-3.67056861" z3="0.69692003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.14693103" y3="-5.12003451" z3="-4.76017309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.10889657" y3="-4.90567039" z3="-3.71882361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.77217738" y3="-4.33473926" z3="-1.08799898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.8841385" y3="-4.47429722" z3="-2.84116273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.42450874" y3="-5.07629872" z3="-3.28297947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.75733241" y3="-4.78703269" z3="-1.96165434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.56432202" y3="-4.20144169" z3="-1.50908308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91544768" y3="-4.33057423" z3="-3.17157317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.19795737" y3="-5.40891537" z3="-3.97828496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.79355431" y3="-4.89200052" z3="-1.63151507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.99473613" y3="-3.93655112" z3="0.24309648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14815495" y3="-3.77342019" z3="0.87813618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.01666989" y3="-4.25771137" z3="0.42891305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1582441" y3="-3.65380259" z3="2.34576133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.238647" y3="-3.49937143" z3="5.1441227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34057849" y3="-3.94559213" z3="3.04134639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0169327" y3="-3.2860096" z3="3.07444547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05441233" y3="-3.20920728" z3="4.46349876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37912753" y3="-3.87183705" z3="4.43103179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.23532175" y3="-4.24078856" z3="2.48622696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06974992" y3="-3.07175333" z3="2.57388975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.14445479" y3="-2.93873824" z3="5.00659177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30493272" y3="-4.11212503" z3="4.96091186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26715689" y3="-3.44746622" z3="6.23609381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44871047" y3="-3.81465598" z3="-0.58105615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19272421" y3="-3.26071109" z3="-1.00882049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50222408" y3="0.38878964" z3="-4.65282161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10496905" y3="-1.8617457" z3="0.03054172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99806905" y3="-1.14048602" z3="1.21752809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.97138729" y3="-0.46250704" z3="1.60723086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.56075254" y3="0.51771521" z3="1.32867666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.71371461" y3="1.46160553" z3="-0.26838614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.88193969" y3="-0.64201665" z3="1.45165356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.62067989" y3="1.65778442" z3="2.81374072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-4.00126997" y3="-1.19624858" z3="2.08224824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.84489974" y3="-0.59997319" z3="3.35982142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.37429776" y3="0.83317711" z3="-1.10995122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.04567504" y3="2.34147317" z3="-0.21704319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.74196471" y3="1.82556079" z3="-0.44100089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.96312062" y3="-1.0098811" z3="2.48773619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.81599205" y3="-0.11311299" z3="1.19227868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79657921" y3="-1.48693697" z3="0.74945323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.63268853" y3="1.08134215" z3="3.75577829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.27112084" y3="2.31035769" z3="2.83013924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.51220548" y3="2.30963303" z3="2.79263311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.97886" y3="-1.0241246" z3="3.89227998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.76905411" y3="-0.83096135" z3="3.90621458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.7246423" y3="0.49186539" z3="3.26724335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83045518" y3="-0.58473518" z3="0.99619219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4512793" y3="-1.92974056" z3="0.90844188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78546997" y3="-2.54729059" z3="1.96035992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51477378" y3="-1.80544221" z3="3.10603619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.93958845" y3="-0.48793899" z3="3.25088492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60549405" y3="0.11538938" z3="2.1888101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.6081133" y3="-2.46911089" z3="-0.02651953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.4286272" y3="-3.57435649" z3="1.87507468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64568289" y3="-2.38866161" z3="4.13310363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.7074587" y3="0.06102634" z3="4.16415517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.91079572" y3="1.16259258" z3="2.26421225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79334957" y3="0.67483474" z3="-4.2003072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.81370758" y3="-0.26178683" z3="-4.31653873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.52780289" y3="-1.48670097" z3="-4.91538266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.26533205" y3="-1.78226543" z3="-5.42258674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.7491712" y3="-0.84339097" z3="-5.27893955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.9871709" y3="1.62659073" z3="-3.70160038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81659626" y3="-0.06426219" z3="-3.93566872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.57983384" y3="-2.50288545" z3="-4.99354588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.08781547" y3="-2.74681049" z3="-5.89371133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.75422108" y3="-1.07988656" z3="-5.63371259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.24342258" y3="-1.65841791" z3="5.01804938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33637241" y3="-3.55679727" z3="4.02265347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.43017309" y3="-3.41119945" z3="-5.78264365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.53983444" y3="-2.38306782" z3="-4.25726348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.13490785" y3="1.06654485" z3="-1.57328867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.18479713" y3="1.48239104" z3="-2.55128547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.51943201" y3="1.28870719" z3="-1.80784807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.95361879" y3="1.87360343" z3="-2.97206351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.23760521" y3="0.97114335" z3="-1.04553904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.02180522" y3="2.0319153" z3="-3.14476131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.66889493" y3="2.06676479" z3="-3.75503151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.01456657" y3="2.25601152" z3="-3.95977442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95455387" y3="2.35542121" z3="-4.5294428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.36334282" y3="2.69854501" z3="-4.89715582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.55966628" y3="3.20215525" z3="-3.4669282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.4564097" y3="3.63572694" z3="-4.2602668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.43876171" y3="4.19394914" z3="-2.94708707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.26728622" y3="5.52419834" z3="-3.24793246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.26091522" y3="3.89222014" z3="-2.296188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.95963289" y3="6.26471064" z3="-2.83725908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.31260041" y3="5.01759324" z3="-4.56404617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.20157835" y3="5.94446825" z3="-4.078578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.46942758" y3="5.33119973" z3="-5.18735279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.0807061" y3="7.0046949" z3="-4.31810204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46958251" y3="-2.38826351" z3="-0.35037701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.38049977" y3="-3.14379068" z3="-1.14891997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00474749" y3="-2.8309798" z3="0.50546973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10904994" y3="-1.58060778" z3="-0.75381226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17200869" y3="-1.50152552" z3="-1.09707301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35446202" y3="-0.46626951" z3="-1.43891991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09890916" y3="-1.5692091" z3="-0.8503165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.34653711" y3="-2.15351179" z3="-1.96582352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3582,.1225,-.2062;7.4195,.1165,.3625;6.6853,.4168,-.3913;4.7876,1.2677,-2.3103;4.4164,.534,-1.1952;2.7523,.9251,-3.6679;3.7124,1.8004,-3.1957;1.4847,2.6925,-4.6869;1.5948,1.3579,-4.3804;.6155,3.0485,-5.2487;2.8864,-.4027,-3.3985;3.1088,.2197,-.9849;2.3804,-.9511,-1.9263;.9133,-.8042,-1.7345;3.0826,-2.2725,-1.7414;-.1203,-3.6706,.6969;.1469,-5.12,-4.7602;-.1089,-4.9057,-3.7188;-.7722,-4.3347,-1.088;.8841,-4.4743,-2.8412;-1.4245,-5.0763,-3.283;-1.7573,-4.787,-1.9617;.5643,-4.2014,-1.5091;1.9154,-4.3306,-3.1716;-2.198,-5.4089,-3.9783;-2.7936,-4.892,-1.6315;-.9947,-3.9366,.2431;-2.1482,-3.7734,.8781;-3.0167,-4.2577,.4289;-2.1582,-3.6538,2.3458;-2.2386,-3.4994,5.1441;-3.3406,-3.9456,3.0413;-1.0169,-3.286,3.0744;-1.0544,-3.2092,4.4635;-3.3791,-3.8718,4.431;-4.2353,-4.2408,2.4862;-.0697,-3.0718,2.5739;-.1445,-2.9387,5.0066;-4.3049,-4.1121,4.9609;-2.2672,-3.4475,6.2361;1.4487,-3.8147,-.5811;2.1927,-3.2607,-1.0088;.5022,.3888,-4.6528;-3.105,-1.8617,.0305;-2.9981,-1.1405,1.2175;-1.9714,-.4625,1.6072;-.5608,.5177,1.3287;-.7137,1.4616,-.2684;.8819,-.642,1.4517;-.6207,1.6578,2.8137;-4.0013,-1.1962,2.0822;-3.8449,-.6,3.3598;-.3743,.8332,-1.11;-.0457,2.3415,-.217;-1.742,1.8256,-.441;.9631,-1.0099,2.4877;1.816,-.1131,1.1923;.7966,-1.4869,.7495;-.6327,1.0813,3.7558;.2711,2.3104,2.8301;-1.5122,2.3096,2.7926;-2.9789,-1.0241,3.8923;-4.7691,-.831,3.9062;-3.7246,.4919,3.2672;4.8305,-.5847,.9962;4.4513,-1.9297,.9084;3.7855,-2.5473,1.9604;3.5148,-1.8054,3.106;3.9396,-.4879,3.2509;4.6055,.1154,2.1888;4.6081,-2.4691,-.0265;3.4286,-3.5744,1.8751;2.6457,-2.3887,4.1331;3.7075,.061,4.1642;4.9108,1.1626,2.2642;-.7933,.6748,-4.2003;-1.8137,-.2618,-4.3165;-1.5278,-1.4867,-4.9154;-.2653,-1.7823,-5.4226;.7492,-.8434,-5.2789;-.9872,1.6266,-3.7016;-2.8166,-.0643,-3.9357;-2.5798,-2.5029,-4.9935;-.0878,-2.7468,-5.8937;1.7542,-1.0799,-5.6337;2.2434,-1.6584,5.018;2.3364,-3.5568,4.0227;-2.4302,-3.4112,-5.7826;-3.5398,-2.3831,-4.2573;7.1349,1.0665,-1.5733;6.1848,1.4824,-2.5513;8.5194,1.2887,-1.8078;8.9536,1.8736,-2.9721;9.2376,.9711,-1.0455;10.0218,2.0319,-3.1448;6.6689,2.0668,-3.755;8.0146,2.256,-3.9598;5.9546,2.3554,-4.5294;8.3633,2.6985,-4.8972;3.5597,3.2022,-3.4669;2.4564,3.6357,-4.2603;4.4388,4.1939,-2.9471;4.2673,5.5242,-3.2479;5.2609,3.8922,-2.2962;4.9596,6.2647,-2.8373;2.3126,5.0176,-4.564;3.2016,5.9445,-4.0786;1.4694,5.3312,-5.1874;3.0807,7.0047,-4.3181;-4.4696,-2.3883,-.3504;-4.3805,-3.1438,-1.1489;-5.0047,-2.831,.5055;-5.109,-1.5806,-.7538;-2.172,-1.5015,-1.0971;-2.3545,-.4663,-1.4389;-1.0989,-1.5692,-.8503;-2.3465,-2.1535,-1.9658;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649730405121</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004551040544 0.000591634542 0.022691810097 0.005337775111</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029896493 -0.001926288 0.000141510 0.000148244 0.000203850 0.000261262 0.000292118 0.000339846 0.000509903 0.000559823 0.000707613 0.000766873 0.000799242 0.000821324 0.000868733 0.000950129 0.001083804 0.001118263 0.001216638 0.001257329 0.001308411 0.001343979 0.001599385 0.001653631 0.001792635 0.002070997 0.002120251 0.002212080 0.002267801 0.002381327 0.002649398 0.003000319 0.003286693 0.003759795 0.003848600 0.004037945 0.004508335 0.005125043 0.005430795 0.005674428 0.005920747 0.006147384 0.006517444 0.007211655 0.007599999 0.008094305 0.008439541 0.008907801 0.009450267 0.009871012 0.011043228 0.011623081 0.012767029 0.012934932 0.013302043 0.013767092 0.014496180 0.014880741 0.015198111 0.015436047 0.016060599 0.016575953 0.017283404 0.017629690 0.018079901 0.018536447 0.019530204 0.020073718 0.020739711 0.020885529 0.022119433 0.022845120 0.024151219 0.025852677 0.026341656 0.026819260 0.028276011 0.028779639 0.030678649 0.031389656 0.031858907 0.033340222 0.033711453 0.034222720 0.037133734 0.037454469 0.038716915 0.039152043 0.039273012 0.040787624 0.043133073 0.043714819 0.045158630 0.048331795 0.049066332 0.049458941 0.049983442 0.050982900 0.052112899 0.052332407 0.052391578 0.052571315 0.053393132 0.053737208 0.054068753 0.054698435 0.055116129 0.055911700 0.056364794 0.056465686 0.057076924 0.058291378 0.059430264 0.060291672 0.060724521 0.060977197 0.061562028 0.061783910 0.062277261 0.064898378 0.065663873 0.065810667 0.066619271 0.071653779 0.073776896 0.074707818 0.076892534 0.080031027 0.083613799 0.084985491 0.085227579 0.086256668 0.087140416 0.089664729 0.090647413 0.092920090 0.094498144 0.095557521 0.095813963 0.096503870 0.097375519 0.098200892 0.098524483 0.099235013 0.099897735 0.100527263 0.101424846 0.102042634 0.102663302 0.103295351 0.103726726 0.104376266 0.106044163 0.106602519 0.107513901 0.108445733 0.109638739 0.110696403 0.112273850 0.113124401 0.116665909 0.118521947 0.118822380 0.120969381 0.123403397 0.124641763 0.125805941 0.130401775 0.131554193 0.134769096 0.135888879 0.141750324 0.142371935 0.145112638 0.145906006 0.146533224 0.147005643 0.149221461 0.152618630 0.156104911 0.159475026 0.171983526 0.172549743 0.175616068 0.182669007 0.182911831 0.185936804 0.186606422 0.190782922 0.192518748 0.196519589 0.197650745 0.200047594 0.204706881 0.206749182 0.208130579 0.209611020 0.211931414 0.212448905 0.214709457 0.218002326 0.223863715 0.224772907 0.229681145 0.233575646 0.234290625 0.234841118 0.243293979 0.253500850 0.256509912 0.257675901 0.263881084 0.278174847 0.282224574 0.285977379 0.287732704 0.292030228 0.298953891 0.302889284 0.303038464 0.305132073 0.312639986 0.314548991 0.321416428 0.321447635 0.328678193 0.342870654 0.346482501 0.348945262 0.350273381 0.354297371 0.360731115 0.361467434 0.369757819 0.376365694 0.385764852 0.406221255 0.421728797 0.424578777 0.450440294 0.464782972 0.468600688 0.473606772 0.475584232 0.477687243 0.485709617 0.492993914 0.506542216 0.532254295 0.561947788 0.565314637 0.578550802 0.589961204 0.592149645 0.602560803 0.635396869 0.639077513 0.643353545 0.662132495 0.670371326 0.680365279 0.683655048 0.691229460 0.694227664 0.703813230 0.712035624 0.714881126 0.738170655 0.749911456 0.759265427 0.771840032 0.776586751 0.804070496 0.808671440 0.810898463 0.813145194 0.819836054 0.820461302 0.828964548 0.830456880 0.831402094 0.839540259 0.844139177 0.844903603 0.849379297 0.857136950 0.861476821 0.864592752 0.870269500 0.872267492 0.883198261 0.887376479 0.890964895 0.893261191 0.915853835 0.921940008 0.930298959 0.932082947 0.963745778 0.975187161 0.980580780 0.996324142 0.999555502 1.023210074 1.036802396 1.044869794 1.051769458 1.058585392 1.085252872 1.085867662 1.094136271 1.104730384 1.107980365 1.112045990 1.122609702 1.123498809 1.134992221 1.138956388 1.168870748 1.170544409 1.178856546 1.185467907 1.194052695 1.206990418 1.219878836 1.239986856 1.295251411 1.310304430 1.314278801 1.323758625 1.325278874 1.326452619 1.332904558 1.340340867 1.341695572 1.355360967 1.374673533 1.377704320 1.380473849 1.380936448 1.390469645 1.418347813 1.550978032 1.659892621 1.766569103</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">42</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.35663029" y3="0.12158858" z3="-0.2055633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.41749352" y3="0.11862746" z3="0.3645581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.68331508" y3="0.41828368" z3="-0.38951973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78560811" y3="1.26808989" z3="-2.30879516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41470642" y3="0.53241932" z3="-1.19475321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75239032" y3="0.9232592" z3="-3.66915976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.71016896" y3="1.80004991" z3="-3.19419021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.48228237" y3="2.69027692" z3="-4.68657691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59608847" y3="1.35414031" z3="-4.38464429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.61270297" y3="3.04541879" z3="-5.24836164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88738729" y3="-0.40439355" z3="-3.40021182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10739625" y3="0.21623882" z3="-0.98554148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37989936" y3="-0.95382791" z3="-1.92879713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91267947" y3="-0.80667821" z3="-1.73786335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08151953" y3="-2.27553362" z3="-1.74413935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12303866" y3="-3.66846142" z3="0.69628073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.13790694" y3="-5.11960685" z3="-4.76092848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.11661263" y3="-4.90468339" z3="-3.7193709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.77696072" y3="-4.33188231" z3="-1.08819169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.87785639" y3="-4.47479423" z3="-2.84252284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.43215263" y3="-5.07284639" z3="-3.28248834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.76353639" y3="-4.78251102" z3="-1.96104125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.55948594" y3="-4.20107824" z3="-1.51032611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9091089" y3="-4.33277043" z3="-3.17379815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.20700145" y3="-5.40324818" z3="-3.97750003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.79989819" y3="-4.88487264" z3="-1.63038137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.99813351" y3="-3.93296055" z3="0.24288808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15125833" y3="-3.7681483" z3="0.87838619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.02006662" y3="-4.2523441" z3="0.43006524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16001354" y3="-3.6501134" z3="2.34644261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23805618" y3="-3.49823754" z3="5.14516131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34226429" y3="-3.94062065" z3="3.04267585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01745573" y3="-3.28526736" z3="3.07475748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05376845" y3="-3.20967648" z3="4.46395145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37970369" y3="-3.86804697" z3="4.43249237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.23795055" y3="-4.23389403" z3="2.48797809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.07013449" y3="-3.07256775" z3="2.57379675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.14290067" y3="-2.94143266" z3="5.00668488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30555718" y3="-4.10724648" z3="4.96279679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26570211" y3="-3.44723966" z3="6.23720871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44526268" y3="-3.81561128" z3="-0.58293414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18982075" y3="-3.26312184" z3="-1.01120912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50695606" y3="0.38159639" z3="-4.66429589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10630375" y3="-1.85689791" z3="0.03322305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99631565" y3="-1.13499479" z3="1.2198574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.96834498" y3="-0.45780144" z3="1.60698589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.55497114" y3="0.51864062" z3="1.32766248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.70627941" y3="1.46281229" z3="-0.26935331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.88445649" y3="-0.64512118" z3="1.44954169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.61090112" y3="1.65871207" z3="2.81288455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.99778392" y3="-1.18936172" z3="2.08649042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.83779696" y3="-0.59380827" z3="3.36413472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.37083494" y3="0.8324285" z3="-1.11123175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.0336387" y3="2.33955658" z3="-0.21906015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.73321649" y3="1.8318571" z3="-0.44038255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.96458203" y3="-1.01443439" z3="2.485182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.81984803" y3="-0.11820695" z3="1.19090823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79689903" y3="-1.48889903" z3="0.746182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.62337416" y3="1.08220701" z3="3.75488483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.28257539" y3="2.3090705" z3="2.82850304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.50084404" y3="2.31280847" z3="2.79274026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.97130572" y3="-1.01977359" z3="3.89458093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.76124423" y3="-0.82348263" z3="3.91230227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.71584906" y3="0.49786179" z3="3.27172627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82943076" y3="-0.58683524" z3="0.99635125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.44911898" y3="-1.93144145" z3="0.90722088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78410829" y3="-2.54986706" z3="1.95911789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5152394" y3="-1.80928205" z3="3.10607603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.94114856" y3="-0.49226563" z3="3.25217215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60637814" y3="0.11192482" z3="2.1901545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.60435664" y3="-2.46967671" z3="-0.02870441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.42639127" y3="-3.57655669" z3="1.87288535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64664953" y3="-2.39309101" z3="4.13322978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.71038902" y3="0.0557058" z3="4.16640155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.91257316" y3="1.15880325" z3="2.26657479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78854137" y3="0.66161053" z3="-4.20922793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80566508" y3="-0.27680383" z3="-4.32707137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.51883165" y3="-1.49726486" z3="-4.92240521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.25648836" y3="-1.7864089" z3="-5.42944212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.75438679" y3="-0.84663965" z3="-5.28781067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98801691" y3="1.6091192" z3="-3.69563065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80729264" y3="-0.0844427" z3="-3.94008491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.56651258" y3="-2.51769261" z3="-5.00647496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.07393474" y3="-2.74843151" z3="-5.91075744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.75876102" y3="-1.07922641" z3="-5.64450525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.24577826" y3="-1.66361299" z3="5.01944709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33629407" y3="-3.56084328" z3="4.02158621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.41326113" y3="-3.422474" z3="-5.79728288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.52686757" y3="-2.40575963" z3="-4.27046446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.13273518" y3="1.06966654" z3="-1.57066309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.18257557" y3="1.48500821" z3="-2.54881916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.51707306" y3="1.2941132" z3="-1.80418631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.95107743" y3="1.88075288" z3="-2.96760758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.23526018" y3="0.97692353" z3="-1.04173377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.01913877" y3="2.04082791" z3="-3.13952648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.66650103" y3="2.07123421" z3="-3.75174041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.01202595" y3="2.26267612" z3="-3.95551099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9521847" y3="2.35949982" z3="-4.52632466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.36070903" y3="2.7066069" z3="-4.89227323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.5551131" y3="3.20199389" z3="-3.46377033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.45138986" y3="3.63504848" z3="-4.25682311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.43250292" y3="4.19448051" z3="-2.9424639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.25901235" y3="5.52480181" z3="-3.24175126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.25497056" y3="3.89314986" z3="-2.29173667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.94997584" y3="6.26585152" z3="-2.82982769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.30568174" y3="5.01694921" z3="-4.55926462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.19309162" y3="5.94445893" z3="-4.07247067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.46266915" y3="5.32967585" z3="-5.18318391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.07087801" y3="7.00462078" z3="-4.31107117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47271986" y3="-2.38120977" z3="-0.34466074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.38650637" y3="-3.13732265" z3="-1.14305488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00679116" y3="-2.82271474" z3="0.51252278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11179746" y3="-1.57255144" z3="-0.74687255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17616781" y3="-1.49621687" z3="-1.09682408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35625108" y3="-0.46021262" z3="-1.43532831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10358894" y3="-1.56691116" z3="-0.85324386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.35352871" y3="-2.14452659" z3="-1.965965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3566,.1216,-.2056;7.4175,.1186,.3646;6.6833,.4183,-.3895;4.7856,1.2681,-2.3088;4.4147,.5324,-1.1948;2.7524,.9233,-3.6692;3.7102,1.8,-3.1942;1.4823,2.6903,-4.6866;1.5961,1.3541,-4.3846;.6127,3.0454,-5.2484;2.8874,-.4044,-3.4002;3.1074,.2162,-.9855;2.3799,-.9538,-1.9288;.9127,-.8067,-1.7379;3.0815,-2.2755,-1.7441;-.123,-3.6685,.6963;.1379,-5.1196,-4.7609;-.1166,-4.9047,-3.7194;-.777,-4.3319,-1.0882;.8779,-4.4748,-2.8425;-1.4322,-5.0728,-3.2825;-1.7635,-4.7825,-1.961;.5595,-4.2011,-1.5103;1.9091,-4.3328,-3.1738;-2.207,-5.4032,-3.9775;-2.7999,-4.8849,-1.6304;-.9981,-3.933,.2429;-2.1513,-3.7681,.8784;-3.0201,-4.2523,.4301;-2.16,-3.6501,2.3464;-2.2381,-3.4982,5.1452;-3.3423,-3.9406,3.0427;-1.0175,-3.2853,3.0748;-1.0538,-3.2097,4.464;-3.3797,-3.868,4.4325;-4.238,-4.2339,2.488;-.0701,-3.0726,2.5738;-.1429,-2.9414,5.0067;-4.3056,-4.1072,4.9628;-2.2657,-3.4472,6.2372;1.4453,-3.8156,-.5829;2.1898,-3.2631,-1.0112;.507,.3816,-4.6643;-3.1063,-1.8569,.0332;-2.9963,-1.135,1.2199;-1.9683,-.4578,1.607;-.555,.5186,1.3277;-.7063,1.4628,-.2694;.8845,-.6451,1.4495;-.6109,1.6587,2.8129;-3.9978,-1.1894,2.0865;-3.8378,-.5938,3.3641;-.3708,.8324,-1.1112;-.0336,2.3396,-.2191;-1.7332,1.8319,-.4404;.9646,-1.0144,2.4852;1.8198,-.1182,1.1909;.7969,-1.4889,.7462;-.6234,1.0822,3.7549;.2826,2.3091,2.8285;-1.5008,2.3128,2.7927;-2.9713,-1.0198,3.8946;-4.7612,-.8235,3.9123;-3.7158,.4979,3.2717;4.8294,-.5868,.9964;4.4491,-1.9314,.9072;3.7841,-2.5499,1.9591;3.5152,-1.8093,3.1061;3.9411,-.4923,3.2522;4.6064,.1119,2.1902;4.6044,-2.4697,-.0287;3.4264,-3.5766,1.8729;2.6466,-2.3931,4.1332;3.7104,.0557,4.1664;4.9126,1.1588,2.2666;-.7885,.6616,-4.2092;-1.8057,-.2768,-4.3271;-1.5188,-1.4973,-4.9224;-.2565,-1.7864,-5.4294;.7544,-.8466,-5.2878;-.988,1.6091,-3.6956;-2.8073,-.0844,-3.9401;-2.5665,-2.5177,-5.0065;-.0739,-2.7484,-5.9108;1.7588,-1.0792,-5.6445;2.2458,-1.6636,5.0194;2.3363,-3.5608,4.0216;-2.4133,-3.4225,-5.7973;-3.5269,-2.4058,-4.2705;7.1327,1.0697,-1.5707;6.1826,1.485,-2.5488;8.5171,1.2941,-1.8042;8.9511,1.8808,-2.9676;9.2353,.9769,-1.0417;10.0191,2.0408,-3.1395;6.6665,2.0712,-3.7517;8.012,2.2627,-3.9555;5.9522,2.3595,-4.5263;8.3607,2.7066,-4.8923;3.5551,3.202,-3.4638;2.4514,3.635,-4.2568;4.4325,4.1945,-2.9425;4.259,5.5248,-3.2418;5.255,3.8931,-2.2917;4.95,6.2659,-2.8298;2.3057,5.0169,-4.5593;3.1931,5.9445,-4.0725;1.4627,5.3297,-5.1832;3.0709,7.0046,-4.3111;-4.4727,-2.3812,-.3447;-4.3865,-3.1373,-1.1431;-5.0068,-2.8227,.5125;-5.1118,-1.5726,-.7469;-2.1762,-1.4962,-1.0968;-2.3563,-.4602,-1.4353;-1.1036,-1.5669,-.8532;-2.3535,-2.1445,-1.966;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649790839550</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004100184745 0.000587187147 0.020586480813 0.005337711368</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029899405 -0.001975861 0.000141576 0.000148233 0.000204299 0.000267571 0.000292190 0.000340221 0.000509936 0.000559836 0.000707669 0.000766969 0.000799247 0.000822207 0.000870372 0.000950151 0.001084010 0.001119691 0.001218726 0.001257330 0.001310760 0.001344820 0.001601875 0.001655439 0.001798998 0.002072463 0.002123105 0.002212385 0.002267542 0.002381311 0.002653491 0.003000495 0.003286704 0.003759967 0.003848569 0.004039276 0.004509208 0.005130273 0.005431556 0.005674510 0.005930150 0.006147667 0.006517734 0.007211601 0.007599939 0.008094349 0.008448012 0.008908169 0.009454037 0.009870853 0.011043375 0.011623103 0.012766962 0.012934992 0.013302059 0.013768314 0.014496413 0.014880674 0.015198108 0.015436125 0.016060471 0.016580735 0.017309119 0.017632228 0.018081046 0.018537309 0.019549846 0.020105886 0.020739738 0.020891523 0.022140485 0.022856793 0.024167484 0.025852871 0.026341883 0.026824676 0.028276384 0.028779676 0.030679646 0.031390249 0.031862110 0.033341555 0.033718325 0.034371067 0.037162838 0.037524173 0.038750105 0.039151513 0.039273882 0.040787647 0.043138268 0.043715949 0.045162774 0.048331861 0.049066518 0.049459096 0.049983416 0.050982905 0.052113169 0.052332419 0.052391621 0.052571460 0.053395011 0.053782423 0.054071265 0.054698655 0.055119281 0.055930032 0.056364843 0.056466485 0.057083278 0.058312246 0.059431924 0.060303650 0.060727543 0.061001183 0.061685761 0.061790413 0.062277563 0.064898522 0.065663900 0.065815476 0.066621006 0.071667405 0.073777658 0.074721130 0.076892469 0.080131169 0.083618593 0.084990291 0.085307963 0.086257645 0.087178480 0.089674915 0.090647507 0.093057138 0.094498265 0.095557502 0.095816610 0.096682556 0.097375625 0.098202690 0.098659232 0.099240913 0.099901014 0.100608711 0.101439928 0.102240383 0.102849709 0.103721571 0.103800839 0.104376232 0.106044338 0.106603458 0.107624476 0.108448135 0.109639525 0.110711967 0.112274707 0.113124908 0.116676395 0.118522021 0.118837405 0.120969843 0.123403463 0.124653547 0.125808163 0.130402288 0.131554456 0.134769828 0.135942514 0.141749940 0.142372365 0.145112902 0.145907040 0.146534578 0.147006128 0.149458881 0.152642565 0.156226347 0.159484092 0.172007930 0.172551743 0.175643570 0.182672794 0.182915880 0.185938279 0.186609171 0.190830847 0.192518480 0.196526248 0.197652704 0.200047017 0.204707027 0.206749188 0.208149196 0.209611022 0.211988449 0.212487447 0.214717328 0.218027151 0.223863810 0.224807361 0.229681087 0.233577063 0.234295129 0.234842553 0.243343911 0.253614548 0.256511557 0.258114218 0.263929217 0.278202694 0.282224617 0.285977382 0.287739424 0.292056543 0.298975176 0.302952667 0.303229476 0.305132163 0.312648067 0.314550296 0.321416482 0.321507646 0.328708279 0.342877689 0.346482688 0.348945288 0.350275102 0.354300365 0.360731370 0.361471041 0.369759701 0.376377826 0.385822995 0.406260948 0.421728872 0.424587893 0.450440293 0.464782760 0.468600792 0.473622611 0.475584220 0.477687124 0.485709842 0.493340813 0.506566226 0.532268937 0.561955907 0.565325228 0.578701844 0.589968168 0.592150436 0.602562170 0.635402390 0.639080360 0.643387365 0.662132972 0.670431447 0.680366893 0.683655067 0.691229460 0.694234441 0.703813267 0.712188185 0.716134408 0.738190945 0.749914321 0.759265573 0.771841086 0.776589309 0.804071141 0.808671678 0.810902311 0.813145200 0.819841667 0.820462395 0.828964684 0.830460439 0.831406335 0.839543855 0.844139417 0.844903597 0.849379284 0.857136938 0.861482808 0.864594053 0.870271680 0.872375583 0.883198294 0.887376535 0.890966250 0.893438519 0.915868414 0.921954809 0.930304314 0.932085698 0.963749538 0.975189042 0.981267052 0.997694728 0.999863252 1.023303040 1.037222922 1.045122897 1.051931720 1.058677593 1.085256492 1.085893790 1.094231029 1.104732783 1.107991197 1.112046544 1.122610167 1.123499032 1.134992518 1.138956758 1.168894936 1.170544428 1.178857755 1.185468701 1.194052692 1.206990035 1.219878885 1.239986721 1.295251377 1.310360080 1.314335318 1.323796322 1.325280898 1.326453111 1.332904735 1.340340852 1.341695558 1.355361228 1.374673571 1.378414243 1.380496076 1.380938382 1.390476157 1.418348334 1.550978211 1.659892606 1.766654372</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">43</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.35513807" y3="0.12080637" z3="-0.20473216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.41557519" y3="0.12104128" z3="0.36689908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.68144742" y3="0.41999916" z3="-0.38750716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78368971" y3="1.26791323" z3="-2.3074441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41317249" y3="0.53069158" z3="-1.19432661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75232312" y3="0.92090575" z3="-3.6697625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.70818587" y3="1.79875372" z3="-3.19337101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.48053586" y3="2.68584181" z3="-4.68766052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59558119" y3="1.35066467" z3="-4.38522369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.61115165" y3="3.04023794" z3="-5.25026384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88935549" y3="-0.40679996" z3="-3.40136653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1062275" y3="0.2124147" z3="-0.98616935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37976272" y3="-0.95709735" z3="-1.93100522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91230221" y3="-0.80974915" z3="-1.74168585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08067079" y3="-2.27915697" z3="-1.74620382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1254001" y3="-3.66663466" z3="0.69574959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.12903728" y3="-5.12001765" z3="-4.76145892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.12429264" y3="-4.90425547" z3="-3.7198041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.78173398" y3="-4.32891025" z3="-1.08845513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.87169754" y3="-4.47595371" z3="-2.84378303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.43996434" y3="-5.06939414" z3="-3.2819906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.76989474" y3="-4.77766035" z3="-1.96048281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.5547993" y3="-4.2010509" z3="-1.51150263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90311781" y3="-4.33626469" z3="-3.1758211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.2159041" y3="-5.39847115" z3="-3.97631186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.80629201" y3="-4.87760209" z3="-1.62926685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.00122558" y3="-3.9295471" z3="0.24280764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15354499" y3="-3.76392223" z3="0.87941014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.02348502" y3="-4.24662817" z3="0.43112717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16140397" y3="-3.64662403" z3="2.34739265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23748454" y3="-3.49687065" z3="5.14624299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34378643" y3="-3.93554493" z3="3.04409579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01777822" y3="-3.28443569" z3="3.07527437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0530965" y3="-3.20990771" z3="4.46453505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38023974" y3="-3.86402219" z3="4.43397722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.24032163" y3="-4.22686275" z3="2.48975589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.07034454" y3="-3.07328194" z3="2.57389167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.14139511" y3="-2.94384813" z3="5.00693833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3061853" y3="-4.102062" z3="4.96464745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26431408" y3="-3.44680244" z3="6.23835093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44205227" y3="-3.81716253" z3="-0.58478428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18734615" y3="-3.26603417" z3="-1.01346539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50882329" y3="0.37656815" z3="-4.66327591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10775949" y3="-1.85104171" z3="0.03563174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9943989" y3="-1.12936919" z3="1.22208584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.96503654" y3="-0.45301049" z3="1.60687262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.54917393" y3="0.51946533" z3="1.32655202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.69848825" y3="1.46397919" z3="-0.27034176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8869755" y3="-0.64833856" z3="1.44731026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.60095275" y3="1.65966388" z3="2.81186117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.99416652" y3="-1.18245821" z3="2.0908072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.83060439" y3="-0.58757022" z3="3.36827591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.36710252" y3="0.83197225" z3="-1.11252368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.02181767" y3="2.33752986" z3="-0.22145909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.72386076" y3="1.83760484" z3="-0.44006123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.96613002" y3="-1.01913766" z3="2.48248735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.82369418" y3="-0.12348485" z3="1.18936404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79722393" y3="-1.4909565" z3="0.74285003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.61402107" y3="1.083165" z3="3.75385734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.29412994" y3="2.30781898" z3="2.82668126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.48929301" y3="2.31594756" z3="2.79251513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.96380995" y3="-1.01517377" z3="3.89684723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.75333277" y3="-0.81583969" z3="3.91824731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.70695044" y3="0.50391779" z3="3.27599334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82853587" y3="-0.58892438" z3="0.99665716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.44707463" y3="-1.93312656" z3="0.90612734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78281809" y3="-2.55247003" z3="1.95794866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51577116" y3="-1.81322398" z3="3.10620272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.94281497" y3="-0.49672707" z3="3.2536011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60737" y3="0.10837559" z3="2.19166615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.6007051" y3="-2.47020084" z3="-0.03074157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.42418276" y3="-3.57876185" z3="1.87071978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64768255" y3="-2.39766093" z3="4.13342989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.71344625" y3="0.05019806" z3="4.1688071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.91445295" y3="1.15491694" z3="2.26915952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78726995" y3="0.65111448" z3="-4.20800816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80160345" y3="-0.290647" z3="-4.32928465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.50904962" y3="-1.50885357" z3="-4.93581312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.24610692" y3="-1.79260058" z3="-5.44566963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.7625774" y3="-0.84891863" z3="-5.29720569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98342184" y3="1.59790326" z3="-3.70898064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80411736" y3="-0.10185799" z3="-3.94675853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.55371418" y3="-2.53114122" z3="-5.01870142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.06275979" y3="-2.75195998" z3="-5.92557303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.76811186" y3="-1.07630579" z3="-5.65523079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.24847818" y3="-1.66906194" z3="5.02113844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33602145" y3="-3.56495863" z3="4.02035736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.40039637" y3="-3.43078558" z3="-5.81786936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.51100314" y3="-2.42599318" z3="-4.27687875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.13063759" y3="1.07308589" z3="-1.56778947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.18043867" y3="1.48763145" z3="-2.54621824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.51475113" y3="1.30008491" z3="-1.8002279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.94849694" y3="1.88854055" z3="-2.96283401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.23299272" y3="0.98336764" z3="-1.03763133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.01639888" y3="2.05053982" z3="-3.13395265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.66410781" y3="2.07594672" z3="-3.74823471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.00943722" y3="2.26988005" z3="-3.95096257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94975478" y3="2.36381673" z3="-4.52293743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.35796784" y3="2.71532983" z3="-4.8870674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.55081318" y3="3.20071177" z3="-3.46149037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.44721193" y3="3.63218963" z3="-4.25551635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.42557511" y3="4.19442567" z3="-2.93777604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.24961275" y3="5.52489635" z3="-3.23524095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.24812383" y3="3.8939148" z3="-2.2867699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.93882201" y3="6.26682637" z3="-2.82182249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.29850353" y3="5.0145986" z3="-4.55533799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.18334035" y3="5.94351781" z3="-4.06603913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.45516927" y3="5.32689018" z3="-5.17908967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.05892557" y3="7.00397971" z3="-4.30288515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47552035" y3="-2.37402046" z3="-0.33908948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.39194923" y3="-3.13086195" z3="-1.13706506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00839183" y3="-2.81431165" z3="0.51945263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11446415" y3="-1.56486238" z3="-0.74047703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17957843" y3="-1.49112527" z3="-1.09635576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35512388" y3="-0.45189058" z3="-1.42930678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10541679" y3="-1.56945984" z3="-0.85767674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.36586369" y3="-2.13525151" z3="-1.96862212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3551,.1208,-.2047;7.4156,.121,.3669;6.6814,.42,-.3875;4.7837,1.2679,-2.3074;4.4132,.5307,-1.1943;2.7523,.9209,-3.6698;3.7082,1.7988,-3.1934;1.4805,2.6858,-4.6877;1.5956,1.3507,-4.3852;.6112,3.0402,-5.2503;2.8894,-.4068,-3.4014;3.1062,.2124,-.9862;2.3798,-.9571,-1.931;.9123,-.8097,-1.7417;3.0807,-2.2792,-1.7462;-.1254,-3.6666,.6957;.129,-5.12,-4.7615;-.1243,-4.9043,-3.7198;-.7817,-4.3289,-1.0885;.8717,-4.476,-2.8438;-1.44,-5.0694,-3.282;-1.7699,-4.7777,-1.9605;.5548,-4.2011,-1.5115;1.9031,-4.3363,-3.1758;-2.2159,-5.3985,-3.9763;-2.8063,-4.8776,-1.6293;-1.0012,-3.9295,.2428;-2.1535,-3.7639,.8794;-3.0235,-4.2466,.4311;-2.1614,-3.6466,2.3474;-2.2375,-3.4969,5.1462;-3.3438,-3.9355,3.0441;-1.0178,-3.2844,3.0753;-1.0531,-3.2099,4.4645;-3.3802,-3.864,4.434;-4.2403,-4.2269,2.4898;-.0703,-3.0733,2.5739;-.1414,-2.9438,5.0069;-4.3062,-4.1021,4.9646;-2.2643,-3.4468,6.2384;1.4421,-3.8172,-.5848;2.1873,-3.266,-1.0135;.5088,.3766,-4.6633;-3.1078,-1.851,.0356;-2.9944,-1.1294,1.2221;-1.965,-.453,1.6069;-.5492,.5195,1.3266;-.6985,1.464,-.2703;.887,-.6483,1.4473;-.601,1.6597,2.8119;-3.9942,-1.1825,2.0908;-3.8306,-.5876,3.3683;-.3671,.832,-1.1125;-.0218,2.3375,-.2215;-1.7239,1.8376,-.4401;.9661,-1.0191,2.4825;1.8237,-.1235,1.1894;.7972,-1.491,.7429;-.614,1.0832,3.7539;.2941,2.3078,2.8267;-1.4893,2.3159,2.7925;-2.9638,-1.0152,3.8968;-4.7533,-.8158,3.9182;-3.707,.5039,3.276;4.8285,-.5889,.9967;4.4471,-1.9331,.9061;3.7828,-2.5525,1.9579;3.5158,-1.8132,3.1062;3.9428,-.4967,3.2536;4.6074,.1084,2.1917;4.6007,-2.4702,-.0307;3.4242,-3.5788,1.8707;2.6477,-2.3977,4.1334;3.7134,.0502,4.1688;4.9145,1.1549,2.2692;-.7873,.6511,-4.208;-1.8016,-.2906,-4.3293;-1.509,-1.5089,-4.9358;-.2461,-1.7926,-5.4457;.7626,-.8489,-5.2972;-.9834,1.5979,-3.709;-2.8041,-.1019,-3.9468;-2.5537,-2.5311,-5.0187;-.0628,-2.752,-5.9256;1.7681,-1.0763,-5.6552;2.2485,-1.6691,5.0211;2.336,-3.565,4.0204;-2.4004,-3.4308,-5.8179;-3.511,-2.426,-4.2769;7.1306,1.0731,-1.5678;6.1804,1.4876,-2.5462;8.5148,1.3001,-1.8002;8.9485,1.8885,-2.9628;9.233,.9834,-1.0376;10.0164,2.0505,-3.134;6.6641,2.0759,-3.7482;8.0094,2.2699,-3.951;5.9498,2.3638,-4.5229;8.358,2.7153,-4.8871;3.5508,3.2007,-3.4615;2.4472,3.6322,-4.2555;4.4256,4.1944,-2.9378;4.2496,5.5249,-3.2352;5.2481,3.8939,-2.2868;4.9388,6.2668,-2.8218;2.2985,5.0146,-4.5553;3.1833,5.9435,-4.066;1.4552,5.3269,-5.1791;3.0589,7.004,-4.3029;-4.4755,-2.374,-.3391;-4.3919,-3.1309,-1.1371;-5.0084,-2.8143,.5195;-5.1145,-1.5649,-.7405;-2.1796,-1.4911,-1.0964;-2.3551,-.4519,-1.4293;-1.1054,-1.5695,-.8577;-2.3659,-2.1353,-1.9686;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649831203626</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004844684540 0.000698942415 0.024186131447 0.005337446814</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029902184 -0.002959907 0.000142593 0.000151439 0.000204296 0.000267671 0.000294067 0.000340234 0.000509975 0.000560418 0.000707698 0.000766962 0.000799550 0.000824283 0.000875711 0.000950170 0.001084491 0.001120582 0.001220826 0.001257803 0.001327072 0.001344896 0.001609189 0.001660989 0.001864132 0.002078584 0.002198827 0.002216335 0.002331067 0.002381999 0.002669393 0.003000491 0.003286754 0.003761573 0.003849164 0.004049593 0.004551882 0.005131535 0.005432531 0.005674774 0.005936049 0.006157142 0.006517676 0.007213904 0.007602257 0.008095407 0.008456512 0.008917043 0.009457337 0.009871145 0.011043672 0.011623579 0.012767022 0.012934997 0.013302142 0.013769012 0.014498494 0.014881802 0.015198607 0.015437412 0.016060428 0.016585749 0.017373640 0.017640187 0.018091510 0.018537894 0.019556589 0.020104099 0.020739801 0.020891485 0.022139080 0.022858241 0.024177985 0.025852863 0.026341960 0.026826104 0.028276380 0.028779687 0.030679714 0.031391537 0.031865313 0.033344369 0.033725987 0.034604447 0.037195559 0.037734447 0.038920688 0.039151372 0.039298521 0.040788351 0.043152969 0.043717632 0.045176244 0.048332567 0.049066794 0.049459576 0.049983995 0.050982948 0.052113667 0.052332425 0.052391623 0.052571793 0.053397501 0.053854431 0.054077457 0.054699385 0.055124172 0.055958874 0.056364940 0.056467752 0.057096409 0.058348306 0.059436247 0.060329939 0.060738921 0.061045597 0.061777103 0.062027795 0.062282557 0.064898747 0.065664795 0.065821508 0.066621620 0.071682335 0.073778795 0.074731233 0.076892506 0.080231882 0.083624268 0.084995069 0.085395533 0.086258692 0.087225505 0.089687447 0.090647695 0.093228386 0.094498378 0.095557509 0.095818759 0.096857745 0.097375891 0.098203670 0.098760041 0.099246838 0.099902612 0.100660444 0.101445445 0.102307380 0.102941618 0.103725781 0.104376031 0.104958763 0.106046529 0.106604310 0.107884794 0.108464582 0.109640579 0.110774327 0.112276804 0.113126903 0.116693275 0.118522815 0.118896389 0.120973814 0.123403382 0.124684989 0.125814025 0.130403016 0.131554361 0.134770597 0.135973090 0.141754291 0.142373441 0.145120980 0.145910845 0.146537266 0.147006365 0.149442393 0.152639939 0.156215378 0.159488133 0.172007496 0.172553145 0.175660634 0.182677719 0.182942540 0.185938601 0.186609309 0.190888015 0.192520411 0.196528209 0.197653533 0.200048932 0.204706906 0.206749226 0.208155267 0.209611038 0.212032573 0.212488965 0.214725717 0.218034866 0.223863862 0.224846740 0.229681221 0.233577774 0.234296833 0.234843945 0.243414021 0.253780331 0.256513031 0.258642556 0.264021054 0.278233038 0.282224682 0.285977388 0.287763987 0.292083661 0.298985803 0.302961081 0.303497042 0.305132832 0.312649850 0.314550405 0.321416481 0.321537523 0.328725895 0.342884012 0.346489552 0.348947274 0.350274995 0.354302648 0.360731946 0.361477815 0.369759532 0.376474567 0.385841410 0.406264288 0.421730223 0.424595563 0.450440293 0.464801985 0.468600786 0.473656567 0.475584460 0.477716748 0.485710596 0.494177637 0.506589063 0.532273490 0.561969625 0.565353891 0.578964278 0.589969899 0.592151002 0.602577973 0.635413983 0.639085465 0.643425629 0.662132978 0.670517171 0.680366818 0.683655062 0.691229460 0.694247846 0.703813320 0.712261949 0.717756017 0.738225095 0.749917856 0.759265655 0.771841710 0.776595488 0.804071817 0.808672452 0.810911238 0.813145193 0.819843566 0.820463461 0.828966282 0.830460453 0.831409325 0.839546524 0.844139369 0.844903599 0.849379301 0.857136927 0.861489397 0.864596671 0.870274867 0.872591675 0.883198376 0.887376545 0.890966793 0.893716354 0.915886597 0.921975784 0.930312741 0.932092594 0.963753504 0.975190059 0.981906874 0.998636999 1.000868905 1.023405071 1.037647558 1.045395677 1.052106622 1.058778410 1.085256969 1.085908438 1.094234977 1.104736360 1.108086350 1.112048352 1.122610836 1.123499689 1.134992855 1.138957681 1.168897745 1.170544463 1.178858523 1.185469273 1.194052716 1.207085383 1.219878886 1.239987450 1.295251332 1.310510901 1.314464951 1.323821675 1.325284951 1.326454206 1.332904831 1.340341116 1.341695576 1.355361185 1.374673552 1.378951565 1.380532764 1.380940387 1.390482654 1.418349181 1.550978510 1.659892592 1.766930437</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">44</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.35368084" y3="0.11975149" z3="-0.20408642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.41364525" y3="0.12311614" z3="0.36918414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.67962004" y3="0.42130373" z3="-0.38563382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.781922" y3="1.26770847" z3="-2.30622346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41172914" y3="0.52876287" z3="-1.19410519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75185659" y3="0.91968176" z3="-3.67010363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.70624941" y3="1.79814424" z3="-3.19215344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.47821352" y3="2.68473881" z3="-4.68690157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59593009" y3="1.34902921" z3="-4.38688663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.60859674" y3="3.03747371" z3="-5.25016408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.88961498" y3="-0.40813425" z3="-3.40291157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10513254" y3="0.20867897" z3="-0.98693411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37922497" y3="-0.96004375" z3="-1.93343249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91168864" y3="-0.81254688" z3="-1.74485778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07966618" y3="-2.28234722" z3="-1.74900302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12785227" y3="-3.66444277" z3="0.69532741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.12105474" y3="-5.12176749" z3="-4.76123769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.13117995" y3="-4.90483764" z3="-3.71956892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.78613572" y3="-4.32629394" z3="-1.08829512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.86598102" y3="-4.47757479" z3="-2.84443996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.44674951" y3="-5.06728417" z3="-3.2808573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.77547363" y3="-4.77379711" z3="-1.95945551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.55032997" y3="-4.20116503" z3="-1.51226334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8973623" y3="-4.33986313" z3="-3.17717067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.22380506" y3="-5.39477954" z3="-3.97476126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8119705" y3="-4.87118524" z3="-1.62780911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.00425037" y3="-3.92609831" z3="0.24291262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15626187" y3="-3.75896346" z3="0.87996701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.02638491" y3="-4.24167072" z3="0.43264926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16291999" y3="-3.64285986" z3="2.34832624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23726801" y3="-3.49481002" z3="5.14740544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34530045" y3="-3.93034209" z3="3.04557514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01824849" y3="-3.28334293" z3="3.07589302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05271763" y3="-3.20960699" z3="4.4652337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38096174" y3="-3.85958457" z3="4.43551517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2425896" y3="-4.219926" z3="2.49160997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.07061051" y3="-3.07384935" z3="2.57420946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.14028676" y3="-2.94554462" z3="5.00734876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30704085" y3="-4.09639404" z3="4.96650835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26348286" y3="-3.44534095" z3="6.23953973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43879986" y3="-3.81823898" z3="-0.58627743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18469635" y3="-3.26874413" z3="-1.01557436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51205987" y3="0.37323303" z3="-4.67274154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10854737" y3="-1.84651707" z3="0.03790142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99241978" y3="-1.1240746" z3="1.22380853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.96194717" y3="-0.44836819" z3="1.60611646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.54352355" y3="0.52023982" z3="1.32493638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.69124024" y3="1.46466726" z3="-0.27210816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.8893424" y3="-0.65134699" z3="1.44499612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.59154996" y3="1.66067783" z3="2.81013093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.99056056" y3="-1.17574255" z3="2.09427466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.82385605" y3="-0.58122573" z3="3.3715229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.36361692" y3="0.83093925" z3="-1.11445417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.01064725" y3="2.33519192" z3="-0.2243822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.71517912" y3="1.84271068" z3="-0.44036396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.967436" y3="-1.02325152" z3="2.47981811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.8272922" y3="-0.12849889" z3="1.18759753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79753748" y3="-1.4929782" z3="0.73966735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.60514727" y3="1.08433355" z3="3.75221871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.30504422" y3="2.3067309" z3="2.82415877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.47834576" y3="2.31902886" z3="2.79150855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.95682477" y3="-1.01027655" z3="3.89847795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.74592245" y3="-0.80816999" z3="3.92308711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.69862208" y3="0.51004072" z3="3.27907962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8276151" y3="-0.59106481" z3="0.99685053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.44502666" y3="-1.93486316" z3="0.90510356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78148303" y3="-2.55499099" z3="1.95689625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51615686" y3="-1.81693282" z3="3.10629823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.94432019" y3="-0.50094166" z3="3.25482372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60827813" y3="0.1049313" z3="2.19294846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.59715624" y3="-2.47090585" z3="-0.03260074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.42197163" y3="-3.58089611" z3="1.8688123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64850855" y3="-2.4018642" z3="4.13361696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.71628662" y3="0.04504537" z3="4.1709084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.91625716" y3="1.15113439" z3="2.27141136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78496778" y3="0.64068305" z3="-4.21315036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79547223" y3="-0.30529958" z3="-4.33666337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.50065335" y3="-1.51904656" z3="-4.9446276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.23674149" y3="-1.79494843" z3="-5.45817818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.76778419" y3="-0.84837619" z3="-5.30883345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.993522" y3="1.58341418" z3="-3.68496406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79884007" y3="-0.12478735" z3="-3.94454372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.54201433" y3="-2.54542824" z3="-5.03349449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.04749275" y3="-2.75171813" z3="-5.94975916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.77413269" y3="-1.07021278" z3="-5.66906405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.25072731" y3="-1.67401081" z3="5.02251244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33572788" y3="-3.56871822" z3="4.01944007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.38612684" y3="-3.44253389" z3="-5.83162076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.49981217" y3="-2.44607199" z3="-4.29260834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.12864286" y3="1.07590201" z3="-1.56511049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1784686" y3="1.48972991" z3="-2.54386565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.51254638" y3="1.30529656" z3="-1.79635439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.94616146" y3="1.89541422" z3="-2.95815027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.23076475" y3="0.98912247" z3="-1.03350921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.01391485" y3="2.05925618" z3="-3.12837586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.66203326" y3="2.07984631" z3="-3.74500542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.00718214" y3="2.27609858" z3="-3.94660343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94776208" y3="2.36724243" z3="-4.51995459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.35565014" y3="2.72293319" z3="-4.88205595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.54704392" y3="3.20011547" z3="-3.45913506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.44334167" y3="3.63135916" z3="-4.25317903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.41990737" y3="4.1943674" z3="-2.933735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.24192272" y3="5.52486975" z3="-3.2295898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.24232355" y3="3.89432509" z3="-2.28237297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.92934259" y3="6.26739037" z3="-2.81435929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.29297971" y3="5.01336037" z3="-4.5520881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.17587482" y3="5.94286489" z3="-4.06090811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.44967471" y3="5.32458335" z3="-5.17638332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.04979402" y3="7.00328568" z3="-4.29641541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47791937" y3="-2.36748029" z3="-0.33401171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.3969061" y3="-3.1251009" z3="-1.13151496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00990295" y3="-2.80636076" z3="0.52572567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11642213" y3="-1.55755222" z3="-0.73464294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18257019" y3="-1.48720073" z3="-1.09636769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35409396" y3="-0.44686373" z3="-1.42605381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10898832" y3="-1.56963676" z3="-0.86054584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.37192086" y3="-2.12845096" z3="-1.96833927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3537,.1198,-.2041;7.4136,.1231,.3692;6.6796,.4213,-.3856;4.7819,1.2677,-2.3062;4.4117,.5288,-1.1941;2.7519,.9197,-3.6701;3.7062,1.7981,-3.1922;1.4782,2.6847,-4.6869;1.5959,1.349,-4.3869;.6086,3.0375,-5.2502;2.8896,-.4081,-3.4029;3.1051,.2087,-.9869;2.3792,-.96,-1.9334;.9117,-.8125,-1.7449;3.0797,-2.2823,-1.749;-.1279,-3.6644,.6953;.1211,-5.1218,-4.7612;-.1312,-4.9048,-3.7196;-.7861,-4.3263,-1.0883;.866,-4.4776,-2.8444;-1.4467,-5.0673,-3.2809;-1.7755,-4.7738,-1.9595;.5503,-4.2012,-1.5123;1.8974,-4.3399,-3.1772;-2.2238,-5.3948,-3.9748;-2.812,-4.8712,-1.6278;-1.0043,-3.9261,.2429;-2.1563,-3.759,.88;-3.0264,-4.2417,.4326;-2.1629,-3.6429,2.3483;-2.2373,-3.4948,5.1474;-3.3453,-3.9303,3.0456;-1.0182,-3.2833,3.0759;-1.0527,-3.2096,4.4652;-3.381,-3.8596,4.4355;-4.2426,-4.2199,2.4916;-.0706,-3.0738,2.5742;-.1403,-2.9455,5.0073;-4.307,-4.0964,4.9665;-2.2635,-3.4453,6.2395;1.4388,-3.8182,-.5863;2.1847,-3.2687,-1.0156;.5121,.3732,-4.6727;-3.1085,-1.8465,.0379;-2.9924,-1.1241,1.2238;-1.9619,-.4484,1.6061;-.5435,.5202,1.3249;-.6912,1.4647,-.2721;.8893,-.6513,1.445;-.5915,1.6607,2.8101;-3.9906,-1.1757,2.0943;-3.8239,-.5812,3.3715;-.3636,.8309,-1.1145;-.0106,2.3352,-.2244;-1.7152,1.8427,-.4404;.9674,-1.0233,2.4798;1.8273,-.1285,1.1876;.7975,-1.493,.7397;-.6051,1.0843,3.7522;.305,2.3067,2.8242;-1.4783,2.319,2.7915;-2.9568,-1.0103,3.8985;-4.7459,-.8082,3.9231;-3.6986,.51,3.2791;4.8276,-.5911,.9969;4.445,-1.9349,.9051;3.7815,-2.555,1.9569;3.5162,-1.8169,3.1063;3.9443,-.5009,3.2548;4.6083,.1049,2.1929;4.5972,-2.4709,-.0326;3.422,-3.5809,1.8688;2.6485,-2.4019,4.1336;3.7163,.045,4.1709;4.9163,1.1511,2.2714;-.785,.6407,-4.2132;-1.7955,-.3053,-4.3367;-1.5007,-1.519,-4.9446;-.2367,-1.7949,-5.4582;.7678,-.8484,-5.3088;-.9935,1.5834,-3.685;-2.7988,-.1248,-3.9445;-2.542,-2.5454,-5.0335;-.0475,-2.7517,-5.9498;1.7741,-1.0702,-5.6691;2.2507,-1.674,5.0225;2.3357,-3.5687,4.0194;-2.3861,-3.4425,-5.8316;-3.4998,-2.4461,-4.2926;7.1286,1.0759,-1.5651;6.1785,1.4897,-2.5439;8.5125,1.3053,-1.7964;8.9462,1.8954,-2.9582;9.2308,.9891,-1.0335;10.0139,2.0593,-3.1284;6.662,2.0798,-3.745;8.0072,2.2761,-3.9466;5.9478,2.3672,-4.52;8.3557,2.7229,-4.8821;3.547,3.2001,-3.4591;2.4433,3.6314,-4.2532;4.4199,4.1944,-2.9337;4.2419,5.5249,-3.2296;5.2423,3.8943,-2.2824;4.9293,6.2674,-2.8144;2.293,5.0134,-4.5521;3.1759,5.9429,-4.0609;1.4497,5.3246,-5.1764;3.0498,7.0033,-4.2964;-4.4779,-2.3675,-.334;-4.3969,-3.1251,-1.1315;-5.0099,-2.8064,.5257;-5.1164,-1.5576,-.7346;-2.1826,-1.4872,-1.0964;-2.3541,-.4469,-1.4261;-1.109,-1.5696,-.8605;-2.3719,-2.1285,-1.9683;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649858760653</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006100275991 0.000837636564 0.020395485913 0.005337517255</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029908592 -0.003875070 0.000142673 0.000151443 0.000204570 0.000279654 0.000294163 0.000342403 0.000510243 0.000560981 0.000707880 0.000766952 0.000800580 0.000826186 0.000879746 0.000950224 0.001084856 0.001120714 0.001222127 0.001257873 0.001335975 0.001345169 0.001610278 0.001662502 0.001899529 0.002080366 0.002209400 0.002229883 0.002379851 0.002523652 0.002710239 0.003002987 0.003286793 0.003761460 0.003851609 0.004061255 0.004617181 0.005135597 0.005432458 0.005676221 0.005936033 0.006185264 0.006518381 0.007215869 0.007602336 0.008102551 0.008460373 0.008944869 0.009495815 0.009872636 0.011043617 0.011625173 0.012766921 0.012935017 0.013302060 0.013768644 0.014497988 0.014882829 0.015200223 0.015438662 0.016061615 0.016586453 0.017436909 0.017659334 0.018118423 0.018567059 0.019555992 0.020300898 0.020741641 0.020899842 0.022168607 0.022860752 0.024182462 0.025853033 0.026342511 0.026825955 0.028276487 0.028779755 0.030679806 0.031394571 0.031866509 0.033346202 0.033730708 0.034794949 0.037207643 0.037933953 0.039138578 0.039157012 0.039453621 0.040789783 0.043178701 0.043721010 0.045210132 0.048332889 0.049067355 0.049459918 0.049985294 0.050983091 0.052114119 0.052332434 0.052391639 0.052571833 0.053398483 0.053927561 0.054089413 0.054701777 0.055130064 0.055994275 0.056365070 0.056469710 0.057115455 0.058391050 0.059438640 0.060348078 0.060749090 0.061077525 0.061780625 0.062267919 0.062680113 0.064899103 0.065668946 0.065831996 0.066621802 0.071700387 0.073779230 0.074737743 0.076892505 0.080319301 0.083629829 0.084997819 0.085471582 0.086260010 0.087268718 0.089695054 0.090648031 0.093358729 0.094498427 0.095557483 0.095820279 0.096961381 0.097376084 0.098204105 0.098815189 0.099251004 0.099903199 0.100688797 0.101447754 0.102333054 0.102972960 0.103725918 0.104376015 0.106033124 0.106235956 0.106615295 0.108402798 0.108971954 0.109644014 0.111029875 0.112288632 0.113129540 0.116738296 0.118524044 0.119010196 0.120977129 0.123403550 0.124757335 0.125827802 0.130405030 0.131554704 0.134772009 0.136027651 0.141769459 0.142382584 0.145162006 0.145936032 0.146542799 0.147006432 0.149675397 0.152670325 0.156384010 0.159488073 0.172017740 0.172553247 0.175667203 0.182681282 0.183021814 0.185938689 0.186609115 0.190948680 0.192522385 0.196528165 0.197653623 0.200051915 0.204706794 0.206749353 0.208256976 0.209611093 0.212055040 0.212497284 0.214729651 0.218035909 0.223864149 0.224887839 0.229681199 0.233578326 0.234298056 0.234844263 0.243492936 0.254000933 0.256514194 0.259222505 0.264225950 0.278263946 0.282224815 0.285977406 0.287836620 0.292100257 0.298986088 0.302961709 0.303756455 0.305134086 0.312653449 0.314551092 0.321416732 0.321539155 0.328725684 0.342888627 0.346532144 0.348951750 0.350278909 0.354304498 0.360732330 0.361486537 0.369759989 0.376718526 0.385841393 0.406280646 0.421733889 0.424598043 0.450440296 0.464872068 0.468600851 0.473679474 0.475585632 0.477859665 0.485710914 0.495539158 0.506624176 0.532275934 0.561998977 0.565424885 0.579704252 0.589971943 0.592151732 0.602640524 0.635421961 0.639089414 0.643508825 0.662132988 0.670729923 0.680366928 0.683655111 0.691229460 0.694255016 0.703813505 0.712272176 0.719843650 0.738314798 0.749923277 0.759265811 0.771842250 0.776612026 0.804072257 0.808673344 0.810918625 0.813145188 0.819845325 0.820464560 0.828966983 0.830460629 0.831413357 0.839551028 0.844139345 0.844903644 0.849379402 0.857136923 0.861495940 0.864600792 0.870276608 0.872989055 0.883199610 0.887376565 0.890970233 0.894160154 0.915913217 0.922009648 0.930325355 0.932107867 0.963757640 0.975191013 0.982543965 0.998974620 1.003050362 1.023542929 1.038159349 1.045753846 1.052340279 1.058918126 1.085256986 1.085918256 1.094251793 1.104739602 1.108350671 1.112052388 1.122617783 1.123505135 1.134993235 1.138958859 1.169002329 1.170545069 1.178869884 1.185469526 1.194052954 1.207462468 1.219879054 1.239987717 1.295251471 1.310667090 1.314591330 1.323833832 1.325289642 1.326456813 1.332904813 1.340341127 1.341695548 1.355361980 1.374673532 1.379446435 1.380637709 1.380947085 1.390934245 1.418353565 1.550978582 1.659892575 1.767248775</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">45</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.35179418" y3="0.11877063" z3="-0.20338767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.41126645" y3="0.12575709" z3="0.37165133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.67731402" y3="0.42312431" z3="-0.38356521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77953558" y3="1.26775653" z3="-2.3047753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40981555" y3="0.52686051" z3="-1.1938019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75142651" y3="0.91744222" z3="-3.67135106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.70357489" y3="1.79730936" z3="-3.19092695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.47542081" y3="2.68102623" z3="-4.68698119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59534378" y3="1.34483797" z3="-4.38922773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.60584233" y3="3.03407751" z3="-5.25006917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.89090525" y3="-0.41042173" z3="-3.40481703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10359029" y3="0.20450899" z3="-0.987859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37878332" y3="-0.96341279" z3="-1.93632185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91105768" y3="-0.81602826" z3="-1.74878755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07868713" y3="-2.28605146" z3="-1.75216866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13006787" y3="-3.6620839" z3="0.69458606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.11204712" y3="-5.12190938" z3="-4.76200349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.13888506" y3="-4.90434934" z3="-3.72015385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.79067397" y3="-4.32360829" z3="-1.0884866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.85977991" y3="-4.47860383" z3="-2.84583415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.45437307" y3="-5.06434232" z3="-3.2802608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.78151851" y3="-4.76964402" z3="-1.95872866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.54570943" y3="-4.20107831" z3="-1.51350374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.89120319" y3="-4.34299275" z3="-3.17935382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.23265094" y3="-5.3904569" z3="-3.97349973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.81801959" y3="-4.86467179" z3="-1.62645078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.00715229" y3="-3.92267514" z3="0.24283572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15820625" y3="-3.75520134" z3="0.88118307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.02954061" y3="-4.23616427" z3="0.43382445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16413234" y3="-3.63932246" z3="2.34936304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23675081" y3="-3.49284435" z3="5.14854605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34683526" y3="-3.92477019" z3="3.04698006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01834987" y3="-3.282575" z3="3.07655999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05196196" y3="-3.20960445" z3="4.46596099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38161545" y3="-3.85480845" z3="4.43699113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.24504168" y3="-4.21216815" z3="2.49326241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0704884" y3="-3.07496198" z3="2.57451972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.13868379" y3="-2.94781288" z3="5.00781169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30788623" y3="-4.09015183" z3="4.96831555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26225569" y3="-3.44406934" z3="6.24074349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43565718" y3="-3.81946614" z3="-0.58831238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18216024" y3="-3.27137682" z3="-1.01828284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51400116" y3="0.36574303" z3="-4.6741691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.11004575" y3="-1.8404858" z3="0.039947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99041126" y3="-1.11832014" z3="1.22560749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.95825274" y3="-0.44381316" z3="1.60577938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.53747681" y3="0.52077162" z3="1.32328286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.68311674" y3="1.46527023" z3="-0.27379821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.89208672" y3="-0.6549371" z3="1.44244479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.58101661" y3="1.66166143" z3="2.8083328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.98697057" y3="-1.16836121" z3="2.09814385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.81638339" y3="-0.57441454" z3="3.37522024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.36039179" y3="0.82925742" z3="-1.11643619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.00297484" y3="2.33189094" z3="-0.22781519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.70530926" y3="1.8494152" z3="-0.44041849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.96907084" y3="-1.02811931" z3="2.47690367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.83145094" y3="-0.1343084" z3="1.18567786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79800076" y3="-1.495584" z3="0.73618201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.59523543" y3="1.08546888" z3="3.75050348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.31737825" y3="2.30530633" z3="2.82136104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.46609216" y3="2.32241583" z3="2.79047569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.94894967" y3="-1.00521673" z3="3.9002206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.73771284" y3="-0.79976619" z3="3.92873701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.68932011" y3="0.51666887" z3="3.28280966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82644496" y3="-0.59344543" z3="0.99698651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.44267283" y3="-1.93682603" z3="0.90375885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.78006648" y3="-2.55792779" z3="1.9555593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.516741" y3="-1.82125759" z3="3.10636304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.94611709" y3="-0.50581197" z3="3.25625463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.60928013" y3="0.10101662" z3="2.19441298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.59307632" y3="-2.47163006" z3="-0.03498769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.41964181" y3="-3.58343518" z3="1.86647648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.64963573" y3="-2.40682078" z3="4.13377956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.71962166" y3="0.03907854" z3="4.17339881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.91825069" y3="1.14685553" z3="2.27399173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78224533" y3="0.62777019" z3="-4.21081072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79063827" y3="-0.31851947" z3="-4.33825596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.49205497" y3="-1.52907069" z3="-4.95442639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.22883443" y3="-1.80015648" z3="-5.4698972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.77374324" y3="-0.85213072" z3="-5.31737963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98107558" y3="1.56777889" z3="-3.70409974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79217724" y3="-0.13930611" z3="-3.95061952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.53011468" y3="-2.55852237" z3="-5.04631104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.04028468" y3="-2.75383411" z3="-5.95764281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.77936186" y3="-1.07019787" z3="-5.6798017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.25356004" y3="-1.67985536" z3="5.02419294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33552447" y3="-3.57321517" z3="4.01816535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.37038836" y3="-3.4514555" z3="-5.85201624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.48867775" y3="-2.46633788" z3="-4.30478111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.12608153" y3="1.07961649" z3="-1.56208013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.17588509" y3="1.49264343" z3="-2.54114728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.50975569" y3="1.31181017" z3="-1.79198913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.9431966" y3="1.90393722" z3="-2.95284528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.22793964" y3="0.99617766" z3="-1.02888512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.01079168" y3="2.06995135" z3="-3.12206162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.65930588" y3="2.08493146" z3="-3.74129841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.00427162" y3="2.2838936" z3="-3.94163613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94509149" y3="2.37179339" z3="-4.51650469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.35266338" y3="2.73233516" z3="-4.87636016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.54196907" y3="3.19948713" z3="-3.45583758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.43799469" y3="3.62960442" z3="-4.25016702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.41275571" y3="4.19463357" z3="-2.92837097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.232775" y3="5.5252419" z3="-3.22254764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.2354313" y3="3.89506903" z3="-2.2770618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.91878963" y3="6.26830035" z3="-2.80600007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.28543296" y3="5.01213364" z3="-4.54697234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.16651381" y3="5.94252382" z3="-4.05402879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.44240575" y3="5.32302761" z3="-5.17178039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.03915387" y3="7.00299998" z3="-4.28858904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48066655" y3="-2.36021702" z3="-0.32883108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4022869" y3="-3.11879863" z3="-1.12574824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01142734" y3="-2.79767766" z3="0.5324551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11906792" y3="-1.54985085" z3="-0.72876969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18527797" y3="-1.4828689" z3="-1.09575138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35415833" y3="-0.44162655" z3="-1.42358417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11132788" y3="-1.56887839" z3="-0.86255776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.37867878" y3="-2.12265677" z3="-1.96861474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3518,.1188,-.2034;7.4113,.1258,.3717;6.6773,.4231,-.3836;4.7795,1.2678,-2.3048;4.4098,.5269,-1.1938;2.7514,.9174,-3.6714;3.7036,1.7973,-3.1909;1.4754,2.681,-4.687;1.5953,1.3448,-4.3892;.6058,3.0341,-5.2501;2.8909,-.4104,-3.4048;3.1036,.2045,-.9879;2.3788,-.9634,-1.9363;.9111,-.816,-1.7488;3.0787,-2.2861,-1.7522;-.1301,-3.6621,.6946;.112,-5.1219,-4.762;-.1389,-4.9043,-3.7202;-.7907,-4.3236,-1.0885;.8598,-4.4786,-2.8458;-1.4544,-5.0643,-3.2803;-1.7815,-4.7696,-1.9587;.5457,-4.2011,-1.5135;1.8912,-4.343,-3.1794;-2.2327,-5.3905,-3.9735;-2.818,-4.8647,-1.6265;-1.0072,-3.9227,.2428;-2.1582,-3.7552,.8812;-3.0295,-4.2362,.4338;-2.1641,-3.6393,2.3494;-2.2368,-3.4928,5.1485;-3.3468,-3.9248,3.047;-1.0183,-3.2826,3.0766;-1.052,-3.2096,4.466;-3.3816,-3.8548,4.437;-4.245,-4.2122,2.4933;-.0705,-3.075,2.5745;-.1387,-2.9478,5.0078;-4.3079,-4.0902,4.9683;-2.2623,-3.4441,6.2407;1.4357,-3.8195,-.5883;2.1822,-3.2714,-1.0183;.514,.3657,-4.6742;-3.11,-1.8405,.0399;-2.9904,-1.1183,1.2256;-1.9583,-.4438,1.6058;-.5375,.5208,1.3233;-.6831,1.4653,-.2738;.8921,-.6549,1.4424;-.581,1.6617,2.8083;-3.987,-1.1684,2.0981;-3.8164,-.5744,3.3752;-.3604,.8293,-1.1164;.003,2.3319,-.2278;-1.7053,1.8494,-.4404;.9691,-1.0281,2.4769;1.8315,-.1343,1.1857;.798,-1.4956,.7362;-.5952,1.0855,3.7505;.3174,2.3053,2.8214;-1.4661,2.3224,2.7905;-2.9489,-1.0052,3.9002;-4.7377,-.7998,3.9287;-3.6893,.5167,3.2828;4.8264,-.5934,.997;4.4427,-1.9368,.9038;3.7801,-2.5579,1.9556;3.5167,-1.8213,3.1064;3.9461,-.5058,3.2563;4.6093,.101,2.1944;4.5931,-2.4716,-.035;3.4196,-3.5834,1.8665;2.6496,-2.4068,4.1338;3.7196,.0391,4.1734;4.9183,1.1469,2.274;-.7822,.6278,-4.2108;-1.7906,-.3185,-4.3383;-1.4921,-1.5291,-4.9544;-.2288,-1.8002,-5.4699;.7737,-.8521,-5.3174;-.9811,1.5678,-3.7041;-2.7922,-.1393,-3.9506;-2.5301,-2.5585,-5.0463;-.0403,-2.7538,-5.9576;1.7794,-1.0702,-5.6798;2.2536,-1.6799,5.0242;2.3355,-3.5732,4.0182;-2.3704,-3.4515,-5.852;-3.4887,-2.4663,-4.3048;7.1261,1.0796,-1.5621;6.1759,1.4926,-2.5411;8.5098,1.3118,-1.792;8.9432,1.9039,-2.9528;9.2279,.9962,-1.0289;10.0108,2.07,-3.1221;6.6593,2.0849,-3.7413;8.0043,2.2839,-3.9416;5.9451,2.3718,-4.5165;8.3527,2.7323,-4.8764;3.542,3.1995,-3.4558;2.438,3.6296,-4.2502;4.4128,4.1946,-2.9284;4.2328,5.5252,-3.2225;5.2354,3.8951,-2.2771;4.9188,6.2683,-2.806;2.2854,5.0121,-4.547;3.1665,5.9425,-4.054;1.4424,5.323,-5.1718;3.0392,7.003,-4.2886;-4.4807,-2.3602,-.3288;-4.4023,-3.1188,-1.1257;-5.0114,-2.7977,.5325;-5.1191,-1.5499,-.7288;-2.1853,-1.4829,-1.0958;-2.3542,-.4416,-1.4236;-1.1113,-1.5689,-.8626;-2.3787,-2.1227,-1.9686;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649909325348</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005908422607 0.000789196160 0.021082509737 0.005337001751</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029917955 -0.003106683 0.000142911 0.000152212 0.000204597 0.000284220 0.000294360 0.000342674 0.000510327 0.000561789 0.000708006 0.000766963 0.000800604 0.000826463 0.000879988 0.000950634 0.001084920 0.001121086 0.001222115 0.001258043 0.001336080 0.001345778 0.001610280 0.001662664 0.001899031 0.002080961 0.002209387 0.002229599 0.002379823 0.002533754 0.002711968 0.003005830 0.003286828 0.003762220 0.003852089 0.004061527 0.004619711 0.005151288 0.005432719 0.005676155 0.005942312 0.006193236 0.006518384 0.007215889 0.007602365 0.008103612 0.008476798 0.008951789 0.009521746 0.009872833 0.011043911 0.011625634 0.012767932 0.012935041 0.013302059 0.013771307 0.014498747 0.014882608 0.015200997 0.015438872 0.016064869 0.016586533 0.017460909 0.017670645 0.018134489 0.018604255 0.019557124 0.020594696 0.020746005 0.020944664 0.022238802 0.022873264 0.024183555 0.025853474 0.026342558 0.026826471 0.028277048 0.028780299 0.030680368 0.031396928 0.031866518 0.033347183 0.033732093 0.034870627 0.037210527 0.038016053 0.039147577 0.039199853 0.039995903 0.040794238 0.043199685 0.043723000 0.045256825 0.048332845 0.049068089 0.049460033 0.049986679 0.050983321 0.052114143 0.052332436 0.052391631 0.052571831 0.053398736 0.053951904 0.054095960 0.054705995 0.055131693 0.056013034 0.056365152 0.056470975 0.057129797 0.058417961 0.059440604 0.060360117 0.060759262 0.061098388 0.061780916 0.062270249 0.063358497 0.064899902 0.065671020 0.065843570 0.066621751 0.071708193 0.073779337 0.074738303 0.076892460 0.080349517 0.083631927 0.084997843 0.085493638 0.086260249 0.087282255 0.089695664 0.090648627 0.093397445 0.094498417 0.095557451 0.095821458 0.096978265 0.097376062 0.098204092 0.098824177 0.099252846 0.099903254 0.100699274 0.101448346 0.102340278 0.102982126 0.103725776 0.104375976 0.106043090 0.106548341 0.106705664 0.108439272 0.109632196 0.110009288 0.111864593 0.112384687 0.113133712 0.116818791 0.118524154 0.119130585 0.120978787 0.123404127 0.124845913 0.125846787 0.130405240 0.131554572 0.134772713 0.136085770 0.141782284 0.142390798 0.145191555 0.145959798 0.146543798 0.147006719 0.150011760 0.152722465 0.156674242 0.159493524 0.172044863 0.172554493 0.175668152 0.182683165 0.183105955 0.185940938 0.186613787 0.190991617 0.192521598 0.196528129 0.197653647 0.200051298 0.204706775 0.206749646 0.208489981 0.209611115 0.212063958 0.212521105 0.214730720 0.218036077 0.223868544 0.224916022 0.229682308 0.233578301 0.234300206 0.234844546 0.243543585 0.254170865 0.256514653 0.259624284 0.264518001 0.278289508 0.282225041 0.285977407 0.287948665 0.292099393 0.298987127 0.302973695 0.303923898 0.305134309 0.312685895 0.314557689 0.321416757 0.321556372 0.328740993 0.342890228 0.346619262 0.348954449 0.350295069 0.354305242 0.360732310 0.361493224 0.369766492 0.377083904 0.385891977 0.406392586 0.421739208 0.424601856 0.450440481 0.465012564 0.468600870 0.473680401 0.475588386 0.478201658 0.485711879 0.496784298 0.506633866 0.532277727 0.562023252 0.565498683 0.580550799 0.589976769 0.592151937 0.602742888 0.635422740 0.639089479 0.643612037 0.662134297 0.671021819 0.680367984 0.683656118 0.691229468 0.694258651 0.703813839 0.712274368 0.721554466 0.738454568 0.749929022 0.759266553 0.771842547 0.776634468 0.804072451 0.808673332 0.810919361 0.813145233 0.819846238 0.820464550 0.828967505 0.830463040 0.831414100 0.839551930 0.844140201 0.844903746 0.849379735 0.857140066 0.861496313 0.864605811 0.870280581 0.873456940 0.883203554 0.887377033 0.890980959 0.894743089 0.915915136 0.922050564 0.930336591 0.932139055 0.963761922 0.975191774 0.983072932 0.999072987 1.005694099 1.023724602 1.038707207 1.046209661 1.052656263 1.059110497 1.085256975 1.085922385 1.094323836 1.104741069 1.108800741 1.112059864 1.122635035 1.123518754 1.134993451 1.138959833 1.169283139 1.170547059 1.178898406 1.185469524 1.194053365 1.208087795 1.219879310 1.239988635 1.295253796 1.310824369 1.314683126 1.323833923 1.325292146 1.326457980 1.332905007 1.340341354 1.341695605 1.355362491 1.374673572 1.379458438 1.380654415 1.380947232 1.391496725 1.418356994 1.550978571 1.659892577 1.767740022</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">46</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.35023798" y3="0.11768555" z3="-0.20241898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.4091286" y3="0.12844657" z3="0.37447825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.67529491" y3="0.42491381" z3="-0.38119746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77765019" y3="1.26729933" z3="-2.30323478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40829538" y3="0.52468555" z3="-1.19332463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75162631" y3="0.91492729" z3="-3.67170267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.70172427" y3="1.79579434" z3="-3.1898123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.47382932" y3="2.67717952" z3="-4.68754953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59599005" y3="1.34152119" z3="-4.39037127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.60404201" y3="3.02823859" z3="-5.25166086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.89295251" y3="-0.41297249" z3="-3.40606099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10248294" y3="0.20008909" z3="-0.98856349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37897829" y3="-0.96732626" z3="-1.93875074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9109992" y3="-0.82000729" z3="-1.7527443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07845219" y3="-2.29014924" z3="-1.75464906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13218943" y3="-3.66006548" z3="0.69401967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.10317435" y3="-5.1219679" z3="-4.76263981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.14637224" y3="-4.90400995" z3="-3.72053552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.79504453" y3="-4.32125388" z3="-1.08845722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.85367109" y3="-4.47951787" z3="-2.84718677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.46163339" y3="-5.06194157" z3="-3.27937006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.78723378" y3="-4.76609263" z3="-1.9577106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.54121753" y3="-4.2012176" z3="-1.51469233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.88502363" y3="-4.34573036" z3="-3.18165055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.24090823" y3="-5.3872089" z3="-3.97180962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.82361996" y3="-4.85926536" z3="-1.62466432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.00990364" y3="-3.91961909" z3="0.24292731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16064122" y3="-3.75029023" z3="0.88174111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03232868" y3="-4.23115416" z3="0.43537602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16537776" y3="-3.63540884" z3="2.35027328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23644893" y3="-3.49012581" z3="5.14965427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34829586" y3="-3.91870789" z3="3.04837368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01846892" y3="-3.2817162" z3="3.07718844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05131584" y3="-3.20929271" z3="4.46666058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38235885" y3="-3.84928831" z3="4.43842701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.24734534" y3="-4.20393461" z3="2.4949526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.07024147" y3="-3.07634385" z3="2.57491706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1372333" y3="-2.9498394" z3="5.00826954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30892736" y3="-4.08286598" z3="4.9700264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26136523" y3="-3.44181326" z3="6.24187836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43263581" y3="-3.82101452" z3="-0.59024324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17999535" y3="-3.27471832" z3="-1.0207257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51748441" y3="0.36164321" z3="-4.680482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.11035186" y3="-1.83598128" z3="0.04238971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98784143" y3="-1.1125505" z3="1.22719378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.95454945" y3="-0.43860607" z3="1.60444253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.53067581" y3="0.52151123" z3="1.32110247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.6742417" y3="1.46610622" z3="-0.27608933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.89499035" y3="-0.65876819" z3="1.4397811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.57007535" y3="1.66276727" z3="2.80592338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.9827358" y3="-1.16073388" z3="2.1015141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.80885027" y3="-0.56706696" z3="3.37825455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.35541714" y3="0.82860332" z3="-1.11884251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.01539782" y3="2.32945551" z3="-0.2314139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.69468948" y3="1.85437704" z3="-0.44139083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.97066262" y3="-1.03300562" z3="2.47393006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.83581865" y3="-0.14054691" z3="1.18362464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79866537" y3="-1.49851793" z3="0.73279379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.5850269" y3="1.08693178" z3="3.74830589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.32999233" y3="2.30403478" z3="2.81799486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.45337192" y3="2.32586437" z3="2.78861662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.9412765" y3="-0.99944842" z3="3.90161227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.729503" y3="-0.7908411" z3="3.93346156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.67997993" y3="0.52375777" z3="3.28559625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82547154" y3="-0.59591741" z3="0.99735186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4404321" y3="-1.93884805" z3="0.90266068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77860848" y3="-2.56091032" z3="1.95436841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51723554" y3="-1.82566283" z3="3.10651655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.9478403" y3="-0.51078446" z3="3.25775603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61028023" y3="0.09699952" z3="2.19600296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5891164" y3="-2.47243072" z3="-0.0370548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.41717899" y3="-3.58598057" z3="1.864233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65067786" y3="-2.41186458" z3="4.13403833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.72285983" y3="0.03298635" z3="4.17592381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.92018898" y3="1.14247164" z3="2.27668577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77980741" y3="0.61871553" z3="-4.22096223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78510538" y3="-0.3321402" z3="-4.3491632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.48427937" y3="-1.53971631" z3="-4.96679489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.21974686" y3="-1.80584096" z3="-5.48184456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.77990177" y3="-0.85408292" z3="-5.32558189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99114936" y3="1.55711602" z3="-3.69062693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78899318" y3="-0.16038862" z3="-3.95593676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.52017452" y3="-2.56903426" z3="-5.05899995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.02613462" y3="-2.75830856" z3="-5.97714503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.78720673" y3="-1.06714077" z3="-5.68805003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.25653429" y3="-1.6858654" z3="5.02609258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33502476" y3="-3.57769689" z3="4.01687957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.36050721" y3="-3.46023335" z3="-5.86310433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.47678886" y3="-2.47877421" z3="-4.31537352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.12383357" y3="1.08328397" z3="-1.55873403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.17367339" y3="1.49525895" z3="-2.53822256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.50720726" y3="1.31858617" z3="-1.78727384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.94035204" y3="1.9127907" z3="-2.9471782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.22541035" y3="1.00368611" z3="-1.02389225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.00773489" y3="2.08118453" z3="-3.1153516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.65677591" y3="2.08986139" z3="-3.73735968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="8.0014783" y3="2.29185329" z3="-3.93637335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94254095" y3="2.37615095" z3="-4.51276749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.34971195" y3="2.74204347" z3="-4.87032085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.53775598" y3="3.19788127" z3="-3.45341074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.43397266" y3="3.62679167" z3="-4.24857887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.40573718" y3="4.19415664" z3="-2.92339643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.22310942" y3="5.52491652" z3="-3.21563008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.22820163" y3="3.89543282" z3="-2.27147756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.90706081" y3="6.26892097" z3="-2.7972004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.27841814" y3="5.00948" z3="-4.54309484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.15672188" y3="5.94120285" z3="-4.04742462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.43492238" y3="5.31965081" z3="-5.16771726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.02686343" y3="7.0020163" z3="-4.27992082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48282461" y3="-2.35332811" z3="-0.32345987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.40728398" y3="-3.11273712" z3="-1.119887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01275066" y3="-2.7892176" z3="0.53904458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12058197" y3="-1.54211308" z3="-0.72275343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1879197" y3="-1.47960194" z3="-1.09601587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35218683" y3="-0.43505239" z3="-1.41906635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1123775" y3="-1.57362097" z3="-0.86701303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.3893375" y3="-2.11638586" z3="-1.97119001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3502,.1177,-.2024;7.4091,.1284,.3745;6.6753,.4249,-.3812;4.7777,1.2673,-2.3032;4.4083,.5247,-1.1933;2.7516,.9149,-3.6717;3.7017,1.7958,-3.1898;1.4738,2.6772,-4.6875;1.596,1.3415,-4.3904;.604,3.0282,-5.2517;2.893,-.413,-3.4061;3.1025,.2001,-.9886;2.379,-.9673,-1.9388;.911,-.82,-1.7527;3.0785,-2.2901,-1.7546;-.1322,-3.6601,.694;.1032,-5.122,-4.7626;-.1464,-4.904,-3.7205;-.795,-4.3213,-1.0885;.8537,-4.4795,-2.8472;-1.4616,-5.0619,-3.2794;-1.7872,-4.7661,-1.9577;.5412,-4.2012,-1.5147;1.885,-4.3457,-3.1817;-2.2409,-5.3872,-3.9718;-2.8236,-4.8593,-1.6247;-1.0099,-3.9196,.2429;-2.1606,-3.7503,.8817;-3.0323,-4.2312,.4354;-2.1654,-3.6354,2.3503;-2.2364,-3.4901,5.1497;-3.3483,-3.9187,3.0484;-1.0185,-3.2817,3.0772;-1.0513,-3.2093,4.4667;-3.3824,-3.8493,4.4384;-4.2473,-4.2039,2.495;-.0702,-3.0763,2.5749;-.1372,-2.9498,5.0083;-4.3089,-4.0829,4.97;-2.2614,-3.4418,6.2419;1.4326,-3.821,-.5902;2.18,-3.2747,-1.0207;.5175,.3616,-4.6805;-3.1104,-1.836,.0424;-2.9878,-1.1126,1.2272;-1.9545,-.4386,1.6044;-.5307,.5215,1.3211;-.6742,1.4661,-.2761;.895,-.6588,1.4398;-.5701,1.6628,2.8059;-3.9827,-1.1607,2.1015;-3.8089,-.5671,3.3783;-.3554,.8286,-1.1188;.0154,2.3295,-.2314;-1.6947,1.8544,-.4414;.9707,-1.033,2.4739;1.8358,-.1405,1.1836;.7987,-1.4985,.7328;-.585,1.0869,3.7483;.33,2.304,2.818;-1.4534,2.3259,2.7886;-2.9413,-.9994,3.9016;-4.7295,-.7908,3.9335;-3.68,.5238,3.2856;4.8255,-.5959,.9974;4.4404,-1.9388,.9027;3.7786,-2.5609,1.9544;3.5172,-1.8257,3.1065;3.9478,-.5108,3.2578;4.6103,.097,2.196;4.5891,-2.4724,-.0371;3.4172,-3.586,1.8642;2.6507,-2.4119,4.134;3.7229,.033,4.1759;4.9202,1.1425,2.2767;-.7798,.6187,-4.221;-1.7851,-.3321,-4.3492;-1.4843,-1.5397,-4.9668;-.2197,-1.8058,-5.4818;.7799,-.8541,-5.3256;-.9911,1.5571,-3.6906;-2.789,-.1604,-3.9559;-2.5202,-2.569,-5.059;-.0261,-2.7583,-5.9771;1.7872,-1.0671,-5.6881;2.2565,-1.6859,5.0261;2.335,-3.5777,4.0169;-2.3605,-3.4602,-5.8631;-3.4768,-2.4788,-4.3154;7.1238,1.0833,-1.5587;6.1737,1.4953,-2.5382;8.5072,1.3186,-1.7873;8.9404,1.9128,-2.9472;9.2254,1.0037,-1.0239;10.0077,2.0812,-3.1154;6.6568,2.0899,-3.7374;8.0015,2.2919,-3.9364;5.9425,2.3762,-4.5128;8.3497,2.742,-4.8703;3.5378,3.1979,-3.4534;2.434,3.6268,-4.2486;4.4057,4.1942,-2.9234;4.2231,5.5249,-3.2156;5.2282,3.8954,-2.2715;4.9071,6.2689,-2.7972;2.2784,5.0095,-4.5431;3.1567,5.9412,-4.0474;1.4349,5.3197,-5.1677;3.0269,7.002,-4.2799;-4.4828,-2.3533,-.3235;-4.4073,-3.1127,-1.1199;-5.0128,-2.7892,.539;-5.1206,-1.5421,-.7228;-2.1879,-1.4796,-1.096;-2.3522,-.4351,-1.4191;-1.1124,-1.5736,-.867;-2.3893,-2.1164,-1.9712;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649967485790</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004704250384 0.000670776767 0.021641546726 0.005338028361</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029926038 -0.002312907 0.000142955 0.000153980 0.000205983 0.000284758 0.000294966 0.000344407 0.000510375 0.000563423 0.000708314 0.000766992 0.000800627 0.000826467 0.000882403 0.000951355 0.001085508 0.001123589 0.001222090 0.001258538 0.001337424 0.001346923 0.001613035 0.001664880 0.001903874 0.002081224 0.002209616 0.002229628 0.002381320 0.002536049 0.002754174 0.003009100 0.003288609 0.003769643 0.003856205 0.004069308 0.004636440 0.005243869 0.005450807 0.005685325 0.006074646 0.006198381 0.006522267 0.007216549 0.007616532 0.008105840 0.008547937 0.008953202 0.009531474 0.009873124 0.011047246 0.011625579 0.012773533 0.012935961 0.013302426 0.013778506 0.014506782 0.014883227 0.015201044 0.015438973 0.016070172 0.016588342 0.017467342 0.017670930 0.018140157 0.018631894 0.019558267 0.020733595 0.020755680 0.021053852 0.022298620 0.022885143 0.024184615 0.025853838 0.026342596 0.026826368 0.028277711 0.028780997 0.030680800 0.031397268 0.031866496 0.033347267 0.033732573 0.034895919 0.037210779 0.038034157 0.039147380 0.039207477 0.040335276 0.040798478 0.043224071 0.043726663 0.045296676 0.048332920 0.049068517 0.049459970 0.049987260 0.050983521 0.052114155 0.052332436 0.052391616 0.052572749 0.053399313 0.053949555 0.054096089 0.054712324 0.055131567 0.056014804 0.056365128 0.056471455 0.057135888 0.058427736 0.059442307 0.060367810 0.060779495 0.061116627 0.061782191 0.062270166 0.063809175 0.064900751 0.065672585 0.065852721 0.066629814 0.071707880 0.073779300 0.074739550 0.076892793 0.080348721 0.083632285 0.084997834 0.085491946 0.086261056 0.087282144 0.089696543 0.090651964 0.093396260 0.094498598 0.095557413 0.095822267 0.096978952 0.097376231 0.098204091 0.098824048 0.099253111 0.099903259 0.100702715 0.101448692 0.102342852 0.102986070 0.103725584 0.104375933 0.106044276 0.106566714 0.106793612 0.108450933 0.109636678 0.110268937 0.112165977 0.112976752 0.113174618 0.116899547 0.118524175 0.119211796 0.120980268 0.123404145 0.124904406 0.125860641 0.130405249 0.131554985 0.134772934 0.136163583 0.141785685 0.142392622 0.145195393 0.145962969 0.146543944 0.147007794 0.150051535 0.152730459 0.156696800 0.159509089 0.172054287 0.172561750 0.175668356 0.182685801 0.183120600 0.185948551 0.186620883 0.191007378 0.192531315 0.196528209 0.197655408 0.200060579 0.204707725 0.206750004 0.208765909 0.209611116 0.212084501 0.212524254 0.214759229 0.218036877 0.223876756 0.224926780 0.229683927 0.233578844 0.234302934 0.234846398 0.243558861 0.254230988 0.256514643 0.259786377 0.264717156 0.278304365 0.282225601 0.285977429 0.288023502 0.292110060 0.298988877 0.303017713 0.303994923 0.305134303 0.312734505 0.314567447 0.321416847 0.321604699 0.328789891 0.342911800 0.346663365 0.348954355 0.350309055 0.354305385 0.360732976 0.361493762 0.369770821 0.377271598 0.385926117 0.406465782 0.421740095 0.424620405 0.450440921 0.465090034 0.468600940 0.473753523 0.475590396 0.478425645 0.485719060 0.497714428 0.506656785 0.532277680 0.562042824 0.565562880 0.581433757 0.589987965 0.592152553 0.602859775 0.635446446 0.639101211 0.643714542 0.662134753 0.671328487 0.680368132 0.683658695 0.691229468 0.694294413 0.703814378 0.712339364 0.722099657 0.738572604 0.749931886 0.759267342 0.771842855 0.776649438 0.804074448 0.808674875 0.810937942 0.813145344 0.819846997 0.820464506 0.828969137 0.830463917 0.831414131 0.839571348 0.844140782 0.844903775 0.849379705 0.857152536 0.861515349 0.864609310 0.870289168 0.873695770 0.883210485 0.887377698 0.890997387 0.895172795 0.915923295 0.922081884 0.930339900 0.932171379 0.963764610 0.975192648 0.983359691 0.999100063 1.007515309 1.023872358 1.039074269 1.046551846 1.052918420 1.059272666 1.085256971 1.085922385 1.094486948 1.104741659 1.109341819 1.112071764 1.122658150 1.123536872 1.134993662 1.138960198 1.169651734 1.170551768 1.178937341 1.185469676 1.194054066 1.208875964 1.219879449 1.239989012 1.295254148 1.310827855 1.314693673 1.323834053 1.325292161 1.326457924 1.332904976 1.340341500 1.341695787 1.355362559 1.374673555 1.379466658 1.380673523 1.380947947 1.392316576 1.418359979 1.550978837 1.659892556 1.768053550</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">47</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3484825" y3="0.11623056" z3="-0.20175433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.40681723" y3="0.13093086" z3="0.37713154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.67306261" y3="0.42643182" z3="-0.37902238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77530658" y3="1.26685821" z3="-2.30194782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40652012" y3="0.52216989" z3="-1.19317751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75043275" y3="0.9132421" z3="-3.67245805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.69891862" y3="1.79486207" z3="-3.1884784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.47044171" y3="2.67529199" z3="-4.68650859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59469492" y3="1.33905988" z3="-4.39175225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.60079119" y3="3.02587275" z3="-5.25100576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.8929943" y3="-0.41480796" z3="-3.40826357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10114308" y3="0.19530957" z3="-0.98961474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37850874" y3="-0.97114094" z3="-1.94188353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91043909" y3="-0.824232" z3="-1.75658773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07788273" y3="-2.29411571" z3="-1.75851232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13412663" y3="-3.6572217" z3="0.69310053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.09488897" y3="-5.12313651" z3="-4.76288614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.15326678" y3="-4.90466232" z3="-3.72057972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.79869699" y3="-4.31997072" z3="-1.08820622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.84807564" y3="-4.4809809" z3="-2.84838873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.46818466" y3="-5.0611927" z3="-3.27795099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.79218625" y3="-4.76423557" z3="-1.95619598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.53728325" y3="-4.20190067" z3="-1.51567613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.87913087" y3="-4.34823631" z3="-3.18399515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.24866463" y3="-5.38548138" z3="-3.96959922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.82856073" y3="-4.85533994" z3="-1.62233277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01236824" y3="-3.91620438" z3="0.24275445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16227343" y3="-3.74610429" z3="0.88258658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03495165" y3="-4.22557935" z3="0.43637343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16647107" y3="-3.63116817" z3="2.35096576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2363158" y3="-3.48676807" z3="5.15042717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34985691" y3="-3.91192879" z3="3.04934561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01846997" y3="-3.28062802" z3="3.0776566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05071799" y3="-3.20860844" z3="4.46715474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3833141" y3="-3.84292864" z3="4.4394321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.24976287" y3="-4.19487349" z3="2.49615148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06979337" y3="-3.07782664" z3="2.57521145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.13580985" y3="-2.9517067" z3="5.00859419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31024197" y3="-4.07455032" z3="4.97125497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26076091" y3="-3.43879221" z3="6.24267652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43005291" y3="-3.82257233" z3="-0.59223493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17787598" y3="-3.27786876" z3="-1.02355008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51830974" y3="0.35684914" z3="-4.6834249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.1116847" y3="-1.83014576" z3="0.0435618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98570511" y3="-1.10654816" z3="1.22791452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.9508786" y3="-0.43364085" z3="1.6030805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.52428019" y3="0.5217958" z3="1.31861204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.66537616" y3="1.46641696" z3="-0.2787038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.89764103" y3="-0.6630041" z3="1.43691593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.55882252" y3="1.66374271" z3="2.80310129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.97901265" y3="-1.15291846" z3="2.10429697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.80136453" y3="-0.55933338" z3="3.3806017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.35151025" y3="0.82683052" z3="-1.12193203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.02996879" y3="2.32580083" z3="-0.23541539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.68404439" y3="1.86104503" z3="-0.44240785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.97196671" y3="-1.0380678" z3="2.4708526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.84006345" y3="-0.1474701" z3="1.18122932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79881804" y3="-1.50204938" z3="0.72935593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.57454352" y3="1.0883079" z3="3.74571344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.34324053" y3="2.30230085" z3="2.81402665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.44014677" y3="2.32952573" z3="2.78642962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.93356585" y3="-0.99328023" z3="3.90233714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.72136273" y3="-0.78121298" z3="3.93770451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.67052516" y3="0.53122953" z3="3.28751218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82443404" y3="-0.59875643" z3="0.9974751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4381959" y3="-1.94124919" z3="0.90134285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77721908" y3="-2.56428509" z3="1.95299471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51779727" y3="-1.83046766" z3="3.10650424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.94967278" y3="-0.51617392" z3="3.25911964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61138027" y3="0.09257813" z3="2.19745055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5852504" y3="-2.47362065" z3="-0.03933234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.41482625" y3="-3.58891998" z3="1.86182924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65176373" y3="-2.41730653" z3="4.1341055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.72622735" y3="0.02646066" z3="4.17833513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.92229258" y3="1.13766838" z3="2.27930784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77950222" y3="0.60746982" z3="-4.21419959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78232626" y3="-0.34457454" z3="-4.34724304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.47686195" y3="-1.54903579" z3="-4.97250735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.21174623" y3="-1.8083406" z3="-5.49271629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.78499485" y3="-0.85518057" z3="-5.33585158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98625058" y3="1.54249824" z3="-3.69377324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78492254" y3="-0.17506655" z3="-3.95554127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.51011001" y3="-2.58386558" z3="-5.07266457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.01634278" y3="-2.75812753" z3="-5.99099957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.79198983" y3="-1.06439354" z3="-5.70095334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.25951565" y3="-1.69230361" z3="5.02775479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33459372" y3="-3.58256955" z3="4.01543187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.34528623" y3="-3.47175617" z3="-5.88303553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.47030393" y3="-2.50041576" z3="-4.33231815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.12130864" y3="1.08675397" z3="-1.55555921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.17113599" y3="1.49776116" z3="-2.53548363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.50440804" y3="1.3251715" z3="-1.78253334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.93739433" y3="1.92151678" z3="-2.94139226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.22257627" y3="1.0110161" z3="-1.01880186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.00457435" y3="2.09236545" z3="-3.10837826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.65415966" y3="2.09460545" z3="-3.73350665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.99862312" y3="2.29963207" z3="-3.93103729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94006087" y3="2.38018343" z3="-4.50929203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.34676758" y3="2.75156593" z3="-4.86416421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.53279025" y3="3.1971281" z3="-3.45016413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.42882617" y3="3.6256672" z3="-4.24534374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.39879841" y3="4.19389586" z3="-2.91816659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.2142602" y3="5.5246665" z3="-3.20868056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.22125148" y3="3.89553954" z3="-2.26604472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.89650451" y3="6.26911987" z3="-2.78843952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.27164281" y3="5.00816578" z3="-4.53854634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.14809952" y3="5.94036669" z3="-4.04099654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.42846174" y3="5.31746159" z3="-5.16393788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.01693484" y3="7.0010177" z3="-4.27241107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48508484" y3="-2.34659935" z3="-0.31910246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.41181166" y3="-3.10706979" z3="-1.11468363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0138881" y3="-2.78092233" z3="0.5449438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12266365" y3="-1.53505394" z3="-0.71797127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19056567" y3="-1.47524781" z3="-1.09605067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35901902" y3="-0.43677774" z3="-1.42635394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11860484" y3="-1.55987542" z3="-0.86506655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.38291275" y3="-2.11532339" z3="-1.96500653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3485,.1162,-.2018;7.4068,.1309,.3771;6.6731,.4264,-.379;4.7753,1.2669,-2.3019;4.4065,.5222,-1.1932;2.7504,.9132,-3.6725;3.6989,1.7949,-3.1885;1.4704,2.6753,-4.6865;1.5947,1.3391,-4.3918;.6008,3.0259,-5.251;2.893,-.4148,-3.4083;3.1011,.1953,-.9896;2.3785,-.9711,-1.9419;.9104,-.8242,-1.7566;3.0779,-2.2941,-1.7585;-.1341,-3.6572,.6931;.0949,-5.1231,-4.7629;-.1533,-4.9047,-3.7206;-.7987,-4.32,-1.0882;.8481,-4.481,-2.8484;-1.4682,-5.0612,-3.278;-1.7922,-4.7642,-1.9562;.5373,-4.2019,-1.5157;1.8791,-4.3482,-3.184;-2.2487,-5.3855,-3.9696;-2.8286,-4.8553,-1.6223;-1.0124,-3.9162,.2428;-2.1623,-3.7461,.8826;-3.035,-4.2256,.4364;-2.1665,-3.6312,2.351;-2.2363,-3.4868,5.1504;-3.3499,-3.9119,3.0493;-1.0185,-3.2806,3.0777;-1.0507,-3.2086,4.4672;-3.3833,-3.8429,4.4394;-4.2498,-4.1949,2.4962;-.0698,-3.0778,2.5752;-.1358,-2.9517,5.0086;-4.3102,-4.0746,4.9713;-2.2608,-3.4388,6.2427;1.4301,-3.8226,-.5922;2.1779,-3.2779,-1.0236;.5183,.3568,-4.6834;-3.1117,-1.8301,.0436;-2.9857,-1.1065,1.2279;-1.9509,-.4336,1.6031;-.5243,.5218,1.3186;-.6654,1.4664,-.2787;.8976,-.663,1.4369;-.5588,1.6637,2.8031;-3.979,-1.1529,2.1043;-3.8014,-.5593,3.3806;-.3515,.8268,-1.1219;.03,2.3258,-.2354;-1.684,1.861,-.4424;.972,-1.0381,2.4709;1.8401,-.1475,1.1812;.7988,-1.502,.7294;-.5745,1.0883,3.7457;.3432,2.3023,2.814;-1.4401,2.3295,2.7864;-2.9336,-.9933,3.9023;-4.7214,-.7812,3.9377;-3.6705,.5312,3.2875;4.8244,-.5988,.9975;4.4382,-1.9412,.9013;3.7772,-2.5643,1.953;3.5178,-1.8305,3.1065;3.9497,-.5162,3.2591;4.6114,.0926,2.1975;4.5853,-2.4736,-.0393;3.4148,-3.5889,1.8618;2.6518,-2.4173,4.1341;3.7262,.0265,4.1783;4.9223,1.1377,2.2793;-.7795,.6075,-4.2142;-1.7823,-.3446,-4.3472;-1.4769,-1.549,-4.9725;-.2117,-1.8083,-5.4927;.785,-.8552,-5.3359;-.9863,1.5425,-3.6938;-2.7849,-.1751,-3.9555;-2.5101,-2.5839,-5.0727;-.0163,-2.7581,-5.991;1.792,-1.0644,-5.701;2.2595,-1.6923,5.0278;2.3346,-3.5826,4.0154;-2.3453,-3.4718,-5.883;-3.4703,-2.5004,-4.3323;7.1213,1.0868,-1.5556;6.1711,1.4978,-2.5355;8.5044,1.3252,-1.7825;8.9374,1.9215,-2.9414;9.2226,1.011,-1.0188;10.0046,2.0924,-3.1084;6.6542,2.0946,-3.7335;7.9986,2.2996,-3.931;5.9401,2.3802,-4.5093;8.3468,2.7516,-4.8642;3.5328,3.1971,-3.4502;2.4288,3.6257,-4.2453;4.3988,4.1939,-2.9182;4.2143,5.5247,-3.2087;5.2213,3.8955,-2.266;4.8965,6.2691,-2.7884;2.2716,5.0082,-4.5385;3.1481,5.9404,-4.041;1.4285,5.3175,-5.1639;3.0169,7.001,-4.2724;-4.4851,-2.3466,-.3191;-4.4118,-3.1071,-1.1147;-5.0139,-2.7809,.5449;-5.1227,-1.5351,-.718;-2.1906,-1.4752,-1.0961;-2.359,-.4368,-1.4264;-1.1186,-1.5599,-.8651;-2.3829,-2.1153,-1.965;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649998604553</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003674208988 0.000652091333 0.023323258068 0.005337010897</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029935605 -0.002968998 0.000143180 0.000154519 0.000206973 0.000294362 0.000307193 0.000350661 0.000511744 0.000564007 0.000709322 0.000767454 0.000800614 0.000831769 0.000890747 0.000954142 0.001087173 0.001127494 0.001223969 0.001259619 0.001340145 0.001348807 0.001617166 0.001673243 0.001923962 0.002081780 0.002211820 0.002233893 0.002383152 0.002559722 0.002896991 0.003021616 0.003292913 0.003784134 0.003864107 0.004091890 0.004675299 0.005354148 0.005507816 0.005720374 0.006193327 0.006486662 0.006795434 0.007220083 0.007759335 0.008131368 0.008806134 0.009152626 0.009534278 0.009894221 0.011070174 0.011626521 0.012797864 0.012956185 0.013302588 0.013793061 0.014515992 0.014885032 0.015201184 0.015439137 0.016078003 0.016587736 0.017472616 0.017676317 0.018151070 0.018643178 0.019559008 0.020749300 0.020781461 0.021087998 0.022291140 0.022882847 0.024188528 0.025853785 0.026343097 0.026828254 0.028277891 0.028781563 0.030680799 0.031397343 0.031866620 0.033347269 0.033733084 0.034906721 0.037210580 0.038037687 0.039147211 0.039209210 0.040692341 0.040838956 0.043247325 0.043729077 0.045323590 0.048332907 0.049068669 0.049459947 0.049988229 0.050983871 0.052114797 0.052332449 0.052391640 0.052576647 0.053405333 0.053974959 0.054116209 0.054719895 0.055135886 0.056014963 0.056365103 0.056471445 0.057137029 0.058430884 0.059447951 0.060376869 0.060841211 0.061163205 0.061787860 0.062272540 0.064122619 0.064901314 0.065675533 0.065855570 0.066659865 0.071712430 0.073779372 0.074748070 0.076893825 0.080355669 0.083632281 0.084998024 0.085507658 0.086267300 0.087285976 0.089700364 0.090660131 0.093400676 0.094499199 0.095557407 0.095823397 0.097009921 0.097377384 0.098204101 0.098841605 0.099253293 0.099903665 0.100705097 0.101448720 0.102343209 0.102989246 0.103725423 0.104375922 0.106045107 0.106569696 0.106855492 0.108479264 0.109639489 0.110362724 0.112192620 0.113106110 0.113534310 0.116948219 0.118526206 0.119259442 0.120980798 0.123405183 0.124933982 0.125866295 0.130416054 0.131554798 0.134773273 0.136197122 0.141785936 0.142392478 0.145195217 0.145962760 0.146543954 0.147010483 0.150075161 0.152732822 0.156725640 0.159595444 0.172053607 0.172601630 0.175669494 0.182690631 0.183119791 0.185984229 0.186670861 0.191008594 0.192611024 0.196529210 0.197668187 0.200154672 0.204714425 0.206750464 0.208998562 0.209611248 0.212133599 0.212526162 0.214995605 0.218038594 0.223918825 0.224929558 0.229684803 0.233592444 0.234307441 0.234860495 0.243563868 0.254243215 0.256515580 0.259858381 0.264802434 0.278315545 0.282226280 0.285978746 0.288048155 0.292127235 0.298991243 0.303266728 0.304050181 0.305139188 0.312759241 0.314577281 0.321423197 0.321647629 0.328826820 0.343094215 0.346676504 0.348979219 0.350322104 0.354305373 0.360738203 0.361493775 0.369772724 0.377372870 0.385925401 0.406474690 0.421740149 0.424764599 0.450443266 0.465121537 0.468602273 0.474505845 0.475595313 0.478611728 0.485787714 0.498332500 0.506670001 0.532277652 0.562052407 0.565595147 0.581844139 0.590067938 0.592152725 0.602932659 0.635687544 0.639228480 0.643792605 0.662134710 0.671511259 0.680369161 0.683671711 0.691229487 0.694703350 0.703814895 0.712463450 0.722122394 0.738617829 0.749932311 0.759268556 0.771843123 0.776653525 0.804082521 0.808692447 0.811139112 0.813145792 0.819847875 0.820474097 0.828972510 0.830465540 0.831417252 0.839675879 0.844143228 0.844904317 0.849379840 0.857194484 0.861637924 0.864611690 0.870313270 0.873745740 0.883227570 0.887381207 0.891081903 0.895398819 0.916058656 0.922096617 0.930339903 0.932203573 0.963767943 0.975192785 0.983512672 0.999109507 1.008549718 1.023970246 1.039279244 1.046747472 1.053095348 1.059381661 1.085259151 1.085927582 1.094656996 1.104741828 1.109798531 1.112086921 1.122675176 1.123550851 1.134993727 1.138960828 1.169867738 1.170556437 1.178961735 1.185470101 1.194054420 1.209433692 1.219879567 1.239988796 1.295254171 1.310884434 1.314750396 1.323834012 1.325292848 1.326459218 1.332905075 1.340341487 1.341696006 1.355362610 1.374673545 1.379467312 1.380674267 1.380947875 1.392482035 1.418361286 1.550978822 1.659892531 1.768541028</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">48</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34681059" y3="0.11513471" z3="-0.20073435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.40452904" y3="0.13409941" z3="0.38014382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6708624" y3="0.42857842" z3="-0.37648169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77312883" y3="1.26667493" z3="-2.30015415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.4048673" y3="0.519967" z3="-1.1926149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75067421" y3="0.91038259" z3="-3.67324685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.69660243" y3="1.79354396" z3="-3.18697413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.46823981" y3="2.67076047" z3="-4.68663969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59528708" y3="1.33422193" z3="-4.39386193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.59831908" y3="3.0206318" z3="-5.25122125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.89529243" y3="-0.41767314" z3="-3.40986176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09993155" y3="0.19054204" z3="-0.99039162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37898214" y3="-0.97534854" z3="-1.94466698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91064325" y3="-0.82888137" z3="-1.76048061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07816737" y3="-2.29844567" z3="-1.76167199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1355772" y3="-3.65557928" z3="0.69273812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.08722599" y3="-5.12531529" z3="-4.76297062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.1597871" y3="-4.90573011" z3="-3.72063067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.80259027" y3="-4.31766923" z3="-1.08819126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.84272772" y3="-4.48231728" z3="-2.84962691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.47451833" y3="-5.06051209" z3="-3.27665824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.79721866" y3="-4.76170292" z3="-1.95497297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.53329379" y3="-4.20187485" z3="-1.51691169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.87380526" y3="-4.35123556" z3="-3.18618399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.25570468" y3="-5.38512754" z3="-3.96721146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.83326824" y3="-4.85193471" z3="-1.62013196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01438545" y3="-3.91401438" z3="0.24316279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16403332" y3="-3.74176559" z3="0.88315207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03712954" y3="-4.22090753" z3="0.43768785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16737883" y3="-3.62727553" z3="2.35175149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23611464" y3="-3.48328393" z3="5.15127871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35122109" y3="-3.90531372" z3="3.05041038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01829628" y3="-3.27984295" z3="3.07820374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04999097" y3="-3.2080111" z3="4.46774312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38417778" y3="-3.83645491" z3="4.44050845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2519624" y3="-4.18594694" z3="2.49738573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0691611" y3="-3.07966141" z3="2.57559192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.13428459" y3="-2.95360905" z3="5.0090118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3115604" y3="-4.06591447" z3="4.97248621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2601289" y3="-3.4355262" z3="6.24354505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42746056" y3="-3.82360025" z3="-0.59427853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17635631" y3="-3.28101858" z3="-1.02633964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52144798" y3="0.34999699" z3="-4.68885375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.11095162" y3="-1.82583876" z3="0.04588765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98249159" y3="-1.10063225" z3="1.22901918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.94661123" y3="-0.42817835" z3="1.60121346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.51678793" y3="0.52241999" z3="1.3157564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.65585742" y3="1.46701857" z3="-0.28166858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.90085214" y3="-0.66727736" z3="1.43406082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.54709964" y3="1.66473872" z3="2.79996082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.97441616" y3="-1.14490372" z3="2.10680178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.79378011" y3="-0.55130628" z3="3.38267896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.34592427" y3="0.8257757" z3="-1.12494705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.04327549" y3="2.32300137" z3="-0.23980029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.67274719" y3="1.86605647" z3="-0.44395437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9734896" y3="-1.04311086" z3="2.46784831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.84495348" y3="-0.15456481" z3="1.17901477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.79973848" y3="-1.50562144" z3="0.72608718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.56378044" y3="1.08960218" z3="3.74274771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.35681764" y3="2.30064539" z3="2.8100333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.42646493" y3="2.33309975" z3="2.78378112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.92588068" y3="-0.98675083" z3="3.90300628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.71320029" y3="-0.77151839" z3="3.94131603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.66116971" y3="0.53897396" z3="3.28906663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82347903" y3="-0.60143714" z3="0.99781723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4361258" y3="-1.9435156" z3="0.90008613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77602297" y3="-2.567663" z3="1.95162079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51849435" y3="-1.83538006" z3="3.10655629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.95152472" y3="-0.52164319" z3="3.26066727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61244059" y3="0.08821562" z3="2.19912757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.58155791" y3="-2.4745678" z3="-0.04162835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.41276114" y3="-3.59189614" z3="1.85933741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65300163" y3="-2.42299051" z3="4.1341777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.72957491" y3="0.01976327" z3="4.18097948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.92425767" y3="1.13294405" z3="2.28219916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7757081" y3="0.5987539" z3="-4.22619703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77694517" y3="-0.35461666" z3="-4.36002766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.47137885" y3="-1.55676142" z3="-4.98450891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.20664995" y3="-1.8151665" z3="-5.50065283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.78886725" y3="-0.86047862" z3="-5.33955223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.98687351" y3="1.53200149" z3="-3.695022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78032927" y3="-0.18907564" z3="-3.96558734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.5028234" y3="-2.5902556" z3="-5.08390228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.01064471" y3="-2.76387769" z3="-5.99646586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.7964365" y3="-1.0670734" z3="-5.7036317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.26272257" y3="-1.69908797" z3="5.02958928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33424338" y3="-3.58765913" z3="4.01377369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.33588613" y3="-3.47862626" z3="-5.8892285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.46319476" y3="-2.50678335" z3="-4.34499825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.11876987" y3="1.09103839" z3="-1.55193367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.16860703" y3="1.50091439" z3="-2.53228721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.50152608" y3="1.33294165" z3="-1.77734911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.9341887" y3="1.93163849" z3="-2.93512915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.21967641" y3="1.01961151" z3="-1.01327119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="10.00112988" y3="2.10521385" z3="-3.10089878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.65129407" y3="2.10025704" z3="-3.72922324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.99547144" y3="2.308673" z3="-3.92525327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93719366" y3="2.38508509" z3="-4.50529874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.34345475" y3="2.7625009" z3="-4.85753204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.52777702" y3="3.19585111" z3="-3.44675999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.42370454" y3="3.62301971" z3="-4.24252052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.39109433" y3="4.19378992" z3="-2.91226563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.20400762" y3="5.52469609" z3="-3.20087757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.21356087" y3="3.89616038" z3="-2.25982684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.88440517" y3="6.26994475" z3="-2.77897141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.26363731" y3="5.00600514" z3="-4.53337303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.13764678" y3="5.93944864" z3="-4.03349246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.42044704" y3="5.31476914" z3="-5.15905132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="3.00451244" y3="7.00031655" z3="-4.26342691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48640911" y3="-2.33977716" z3="-0.31408026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.41603541" y3="-3.10153895" z3="-1.10886877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01467374" y3="-2.77214091" z3="0.55118699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.1232835" y3="-1.52756672" z3="-0.71281914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19241054" y3="-1.47334887" z3="-1.0971269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35277737" y3="-0.42429739" z3="-1.41651505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11282154" y3="-1.57682602" z3="-0.87525579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40623601" y3="-2.10950502" z3="-1.97509504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3468,.1151,-.2007;7.4045,.1341,.3801;6.6709,.4286,-.3765;4.7731,1.2667,-2.3002;4.4049,.52,-1.1926;2.7507,.9104,-3.6732;3.6966,1.7935,-3.187;1.4682,2.6708,-4.6866;1.5953,1.3342,-4.3939;.5983,3.0206,-5.2512;2.8953,-.4177,-3.4099;3.0999,.1905,-.9904;2.379,-.9753,-1.9447;.9106,-.8289,-1.7605;3.0782,-2.2984,-1.7617;-.1356,-3.6556,.6927;.0872,-5.1253,-4.763;-.1598,-4.9057,-3.7206;-.8026,-4.3177,-1.0882;.8427,-4.4823,-2.8496;-1.4745,-5.0605,-3.2767;-1.7972,-4.7617,-1.955;.5333,-4.2019,-1.5169;1.8738,-4.3512,-3.1862;-2.2557,-5.3851,-3.9672;-2.8333,-4.8519,-1.6201;-1.0144,-3.914,.2432;-2.164,-3.7418,.8832;-3.0371,-4.2209,.4377;-2.1674,-3.6273,2.3518;-2.2361,-3.4833,5.1513;-3.3512,-3.9053,3.0504;-1.0183,-3.2798,3.0782;-1.05,-3.208,4.4677;-3.3842,-3.8365,4.4405;-4.252,-4.1859,2.4974;-.0692,-3.0797,2.5756;-.1343,-2.9536,5.009;-4.3116,-4.0659,4.9725;-2.2601,-3.4355,6.2435;1.4275,-3.8236,-.5943;2.1764,-3.281,-1.0263;.5214,.35,-4.6889;-3.111,-1.8258,.0459;-2.9825,-1.1006,1.229;-1.9466,-.4282,1.6012;-.5168,.5224,1.3158;-.6559,1.467,-.2817;.9009,-.6673,1.4341;-.5471,1.6647,2.8;-3.9744,-1.1449,2.1068;-3.7938,-.5513,3.3827;-.3459,.8258,-1.1249;.0433,2.323,-.2398;-1.6727,1.8661,-.444;.9735,-1.0431,2.4678;1.845,-.1546,1.179;.7997,-1.5056,.7261;-.5638,1.0896,3.7427;.3568,2.3006,2.81;-1.4265,2.3331,2.7838;-2.9259,-.9868,3.903;-4.7132,-.7715,3.9413;-3.6612,.539,3.2891;4.8235,-.6014,.9978;4.4361,-1.9435,.9001;3.776,-2.5677,1.9516;3.5185,-1.8354,3.1066;3.9515,-.5216,3.2607;4.6124,.0882,2.1991;4.5816,-2.4746,-.0416;3.4128,-3.5919,1.8593;2.653,-2.423,4.1342;3.7296,.0198,4.181;4.9243,1.1329,2.2822;-.7757,.5988,-4.2262;-1.7769,-.3546,-4.36;-1.4714,-1.5568,-4.9845;-.2066,-1.8152,-5.5007;.7889,-.8605,-5.3396;-.9869,1.532,-3.695;-2.7803,-.1891,-3.9656;-2.5028,-2.5903,-5.0839;-.0106,-2.7639,-5.9965;1.7964,-1.0671,-5.7036;2.2627,-1.6991,5.0296;2.3342,-3.5877,4.0138;-2.3359,-3.4786,-5.8892;-3.4632,-2.5068,-4.345;7.1188,1.091,-1.5519;6.1686,1.5009,-2.5323;8.5015,1.3329,-1.7773;8.9342,1.9316,-2.9351;9.2197,1.0196,-1.0133;10.0011,2.1052,-3.1009;6.6513,2.1003,-3.7292;7.9955,2.3087,-3.9253;5.9372,2.3851,-4.5053;8.3435,2.7625,-4.8575;3.5278,3.1959,-3.4468;2.4237,3.623,-4.2425;4.3911,4.1938,-2.9123;4.204,5.5247,-3.2009;5.2136,3.8962,-2.2598;4.8844,6.2699,-2.779;2.2636,5.006,-4.5334;3.1376,5.9394,-4.0335;1.4204,5.3148,-5.1591;3.0045,7.0003,-4.2634;-4.4864,-2.3398,-.3141;-4.416,-3.1015,-1.1089;-5.0147,-2.7721,.5512;-5.1233,-1.5276,-.7128;-2.1924,-1.4733,-1.0971;-2.3528,-.4243,-1.4165;-1.1128,-1.5768,-.8753;-2.4062,-2.1095,-1.9751;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650015600322</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004374934501 0.000744722889 0.018856116833 0.005338311783</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029945018 -0.003334200 0.000143824 0.000156037 0.000207802 0.000294508 0.000307058 0.000351300 0.000511729 0.000564300 0.000712381 0.000767628 0.000801709 0.000834064 0.000891392 0.000954081 0.001087493 0.001128047 0.001225286 0.001259597 0.001340444 0.001348765 0.001618421 0.001673695 0.001923756 0.002083090 0.002213199 0.002233578 0.002383728 0.002558969 0.002905088 0.003031287 0.003294975 0.003788836 0.003872004 0.004096533 0.004673626 0.005373152 0.005531999 0.005741069 0.006192918 0.006498715 0.007180507 0.007226037 0.007899451 0.008229947 0.008882816 0.009527514 0.009816326 0.010676594 0.011396384 0.011679096 0.012834924 0.013167335 0.013336505 0.013817775 0.014521408 0.014888407 0.015201377 0.015439527 0.016085492 0.016593003 0.017484561 0.017720475 0.018172357 0.018646324 0.019566209 0.020764245 0.020888926 0.021085344 0.022330825 0.022898487 0.024194408 0.025854289 0.026344435 0.026833586 0.028277957 0.028782517 0.030681124 0.031398577 0.031866840 0.033347517 0.033734762 0.034918689 0.037211844 0.038037990 0.039147073 0.039211526 0.040765336 0.040941516 0.043270842 0.043731941 0.045330247 0.048332971 0.049068644 0.049459966 0.049988529 0.050984324 0.052117016 0.052332453 0.052391643 0.052585312 0.053422914 0.054011661 0.054188144 0.054729311 0.055147631 0.056020107 0.056365059 0.056471395 0.057136883 0.058431587 0.059456738 0.060380739 0.060929852 0.061266496 0.061816005 0.062283881 0.064261036 0.064901226 0.065680752 0.065855971 0.066714385 0.071725180 0.073779552 0.074757949 0.076896508 0.080367929 0.083632501 0.084997937 0.085529259 0.086277396 0.087294887 0.089702864 0.090675137 0.093404289 0.094500060 0.095558008 0.095823760 0.097040709 0.097379472 0.098204388 0.098865116 0.099253626 0.099904720 0.100705970 0.101448850 0.102343514 0.102992420 0.103725211 0.104375866 0.106046416 0.106569603 0.106922312 0.108544106 0.109646549 0.110383308 0.112192033 0.113105903 0.113643644 0.116950030 0.118527232 0.119294540 0.120981334 0.123405486 0.124939640 0.125866714 0.130441460 0.131555052 0.134775007 0.136198572 0.141786726 0.142394586 0.145195819 0.145965517 0.146543800 0.147014546 0.150305247 0.152775081 0.157009359 0.159789777 0.172071109 0.172697273 0.175670685 0.182698105 0.183132514 0.186035346 0.186750356 0.191008948 0.192805845 0.196532038 0.197707106 0.200429110 0.204725817 0.206750908 0.209112836 0.209611756 0.212212909 0.212560743 0.215579271 0.218042558 0.224011228 0.224929928 0.229684755 0.233636446 0.234312745 0.234889510 0.243566142 0.254242733 0.256518873 0.259906479 0.264815823 0.278323836 0.282226635 0.285981250 0.288047403 0.292127315 0.299012504 0.303697090 0.304183465 0.305160615 0.312760426 0.314580530 0.321450258 0.321647462 0.328830492 0.343522091 0.346680011 0.349092822 0.350326284 0.354305369 0.360751035 0.361495300 0.369773392 0.377376479 0.386011402 0.406527000 0.421744697 0.425046195 0.450448284 0.465122129 0.468605282 0.475580400 0.476352314 0.478679905 0.485992665 0.498970335 0.506745522 0.532298762 0.562061842 0.565620078 0.582138191 0.590179352 0.592153356 0.602976926 0.636188705 0.639644940 0.643881402 0.662137569 0.671613185 0.680369264 0.683697273 0.691229488 0.695636739 0.703815295 0.712621399 0.722157074 0.738629709 0.749932305 0.759270042 0.771843696 0.776653939 0.804098758 0.808726599 0.811606255 0.813146598 0.819849541 0.820485970 0.828977067 0.830465488 0.831426957 0.839943615 0.844144392 0.844906869 0.849382379 0.857286104 0.861975162 0.864613196 0.870346419 0.873745117 0.883257108 0.887388292 0.891255631 0.895482798 0.916429090 0.922102225 0.930348468 0.932227569 0.963771598 0.975192785 0.983591867 0.999113855 1.009064063 1.024017640 1.039379910 1.046829521 1.053182416 1.059437172 1.085262945 1.085941129 1.094819325 1.104742627 1.110124237 1.112102879 1.122684420 1.123558141 1.134993808 1.138961524 1.169951960 1.170559174 1.178971996 1.185470733 1.194054638 1.209824247 1.219879593 1.239990020 1.295263134 1.311308862 1.315076552 1.323838366 1.325293923 1.326459996 1.332905038 1.340341811 1.341696294 1.355364355 1.374673543 1.379724447 1.380798909 1.380971825 1.392753184 1.418365625 1.550978821 1.659892506 1.769005150</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">49</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34551031" y3="0.11363569" z3="-0.19975878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.40258233" y3="0.13683276" z3="0.38314819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.66900308" y3="0.430293" z3="-0.37396103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.771203" y3="1.26592087" z3="-2.2985847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40352972" y3="0.51725379" z3="-1.1921676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75019723" y3="0.90792897" z3="-3.67333641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.69442868" y3="1.79187891" z3="-3.18564709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.46590067" y3="2.66728741" z3="-4.68611727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59443284" y3="1.33132146" z3="-4.39375293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.59592117" y3="3.0156949" z3="-5.25153132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.89695266" y3="-0.42024269" z3="-3.41135609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09910527" y3="0.18534473" z3="-0.99113131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37932723" y3="-0.97981285" z3="-1.94733842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91075564" y3="-0.8336812" z3="-1.76474248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07828922" y3="-2.30307018" z3="-1.76470986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13725074" y3="-3.65364954" z3="0.69209344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.0793289" y3="-5.12815241" z3="-4.76280104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.16639429" y3="-4.90751496" z3="-3.72038501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.80589938" y3="-4.31707359" z3="-1.08776683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.83748464" y3="-4.48480537" z3="-2.85050699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.48096167" y3="-5.06036726" z3="-3.27521423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.80200737" y3="-4.7603045" z3="-1.95343916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.52972434" y3="-4.20325047" z3="-1.51763938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.86836536" y3="-4.35505973" z3="-3.18806601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.26330557" y3="-5.38440138" z3="-3.96494462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.83812703" y3="-4.84841213" z3="-1.61778932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01668545" y3="-3.91084503" z3="0.24294789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16563858" y3="-3.73741669" z3="0.88388281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03963237" y3="-4.21554345" z3="0.43886837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16832343" y3="-3.62285923" z3="2.35246191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23601268" y3="-3.47901715" z3="5.15212826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35267785" y3="-3.89796771" z3="3.05147318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01812896" y3="-3.27874709" z3="3.07874548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04930828" y3="-3.20697246" z3="4.46831224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38513876" y3="-3.82912051" z3="4.44159034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25427085" y3="-4.17634637" z3="2.49874299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06843247" y3="-3.08153216" z3="2.57603812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.13278077" y3="-2.95522608" z3="5.0094314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31299603" y3="-4.05618726" z3="4.97377553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25964638" y3="-3.43126089" z3="6.24440695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.425213" y3="-3.82567842" z3="-0.59602097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17457274" y3="-3.28469331" z3="-1.02884455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52228754" y3="0.34669059" z3="-4.69048204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.11195431" y3="-1.82080656" z3="0.04583268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97951805" y3="-1.09486765" z3="1.22849974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.94198877" y3="-0.42361562" z3="1.59854276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.50952334" y3="0.52253031" z3="1.31252882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.64638302" y3="1.46689958" z3="-0.2851501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.90420076" y3="-0.67170951" z3="1.43096651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.53507454" y3="1.66555852" z3="2.79636449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.96986955" y3="-1.13679324" z3="2.1084505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.78564998" y3="-0.54289583" z3="3.38374628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.34008945" y3="0.82430826" z3="-1.12860073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.05613389" y3="2.3200173" z3="-0.24452008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.66173087" y3="1.86984842" z3="-0.44644548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.97510727" y3="-1.04830103" z3="2.46459802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.84999649" y3="-0.16184331" z3="1.17667431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80060648" y3="-1.5093345" z3="0.72240098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.5527602" y3="1.09091089" z3="3.73942753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.37095356" y3="2.29852289" z3="2.8053723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.412237" y3="2.33682457" z3="2.78069191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.91769609" y3="-0.97972016" z3="3.90281019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.70451191" y3="-0.76101569" z3="3.9442127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.65110046" y3="0.54710867" z3="3.28947812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82287377" y3="-0.60450646" z3="0.99812988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.43433647" y3="-1.94614355" z3="0.898791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77497118" y3="-2.57139112" z3="1.95011508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.51930423" y3="-1.84068123" z3="3.10645759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.95355609" y3="-0.52753684" z3="3.262099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61376608" y3="0.08343308" z3="2.20075029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.57817076" y3="-2.47589177" z3="-0.04391101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.41072893" y3="-3.59517685" z3="1.85663431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65429046" y3="-2.42905666" z3="4.13405298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.73305342" y3="0.01262381" z3="4.18347862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.92645467" y3="1.12779864" z3="2.28506231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77692711" y3="0.59095973" z3="-4.22592857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77604139" y3="-0.36485069" z3="-4.36384959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4663271" y3="-1.56556198" z3="-4.99304802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.19940157" y3="-1.81909714" z3="-5.51080619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.79394202" y3="-0.86219642" z3="-5.34723691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99067474" y3="1.52239581" z3="-3.69480882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78026328" y3="-0.20193268" z3="-3.97192685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.49633944" y3="-2.60069657" z3="-5.0947728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.00089725" y3="-2.76672796" z3="-6.01385153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.80274496" y3="-1.06596545" z3="-5.71049849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.26637524" y3="-1.70639224" z3="5.0315004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33352769" y3="-3.59300132" z3="4.01162473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.32759637" y3="-3.486941" z3="-5.90560337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45734291" y3="-2.51971552" z3="-4.35487384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.11654624" y3="1.09489262" z3="-1.54832992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.16635725" y3="1.50357921" z3="-2.52914288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.49892637" y3="1.34034433" z3="-1.77217107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.93122186" y3="1.94141958" z3="-2.92885189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.21712005" y3="1.02788491" z3="-1.00777511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.99788374" y3="2.11776413" z3="-3.09341319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.64870922" y3="2.10549828" z3="-3.72490827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.99254701" y3="2.3173814" z3="-3.91942645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93460557" y3="2.38962531" z3="-4.50123739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.34030467" y3="2.77319514" z3="-4.85082051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.52329422" y3="3.19419769" z3="-3.44376451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.41935055" y3="3.62035112" z3="-4.24018766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.38378939" y3="4.19313964" z3="-2.90661927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.19394995" y3="5.52417511" z3="-3.19304732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.20608733" y3="3.8963176" z3="-2.25360747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.87206101" y3="6.27031806" z3="-2.76893844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.25643978" y3="5.0033726" z3="-4.52881746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.12757377" y3="5.93800915" z3="-4.02606065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.41292751" y3="5.31129548" z3="-5.15451385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.99190651" y3="6.99911711" z3="-4.25382141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4886083" y3="-2.33338659" z3="-0.31020174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.42087383" y3="-3.09651898" z3="-1.10381675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01579135" y3="-2.76334506" z3="0.55699423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12473187" y3="-1.52060149" z3="-0.70889683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1949038" y3="-1.46998384" z3="-1.09866748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36077585" y3="-0.43139235" z3="-1.42906687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.12330501" y3="-1.5579699" z3="-0.87127518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.39143554" y3="-2.11025868" z3="-1.9651272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3455,.1136,-.1998;7.4026,.1368,.3831;6.669,.4303,-.374;4.7712,1.2659,-2.2986;4.4035,.5173,-1.1922;2.7502,.9079,-3.6733;3.6944,1.7919,-3.1856;1.4659,2.6673,-4.6861;1.5944,1.3313,-4.3938;.5959,3.0157,-5.2515;2.897,-.4202,-3.4114;3.0991,.1853,-.9911;2.3793,-.9798,-1.9473;.9108,-.8337,-1.7647;3.0783,-2.3031,-1.7647;-.1373,-3.6536,.6921;.0793,-5.1282,-4.7628;-.1664,-4.9075,-3.7204;-.8059,-4.3171,-1.0878;.8375,-4.4848,-2.8505;-1.481,-5.0604,-3.2752;-1.802,-4.7603,-1.9534;.5297,-4.2033,-1.5176;1.8684,-4.3551,-3.1881;-2.2633,-5.3844,-3.9649;-2.8381,-4.8484,-1.6178;-1.0167,-3.9108,.2429;-2.1656,-3.7374,.8839;-3.0396,-4.2155,.4389;-2.1683,-3.6229,2.3525;-2.236,-3.479,5.1521;-3.3527,-3.898,3.0515;-1.0181,-3.2787,3.0787;-1.0493,-3.207,4.4683;-3.3851,-3.8291,4.4416;-4.2543,-4.1763,2.4987;-.0684,-3.0815,2.576;-.1328,-2.9552,5.0094;-4.313,-4.0562,4.9738;-2.2596,-3.4313,6.2444;1.4252,-3.8257,-.596;2.1746,-3.2847,-1.0288;.5223,.3467,-4.6905;-3.112,-1.8208,.0458;-2.9795,-1.0949,1.2285;-1.942,-.4236,1.5985;-.5095,.5225,1.3125;-.6464,1.4669,-.2852;.9042,-.6717,1.431;-.5351,1.6656,2.7964;-3.9699,-1.1368,2.1085;-3.7856,-.5429,3.3837;-.3401,.8243,-1.1286;.0561,2.32,-.2445;-1.6617,1.8698,-.4464;.9751,-1.0483,2.4646;1.85,-.1618,1.1767;.8006,-1.5093,.7224;-.5528,1.0909,3.7394;.371,2.2985,2.8054;-1.4122,2.3368,2.7807;-2.9177,-.9797,3.9028;-4.7045,-.761,3.9442;-3.6511,.5471,3.2895;4.8229,-.6045,.9981;4.4343,-1.9461,.8988;3.775,-2.5714,1.9501;3.5193,-1.8407,3.1065;3.9536,-.5275,3.2621;4.6138,.0834,2.2008;4.5782,-2.4759,-.0439;3.4107,-3.5952,1.8566;2.6543,-2.4291,4.1341;3.7331,.0126,4.1835;4.9265,1.1278,2.2851;-.7769,.591,-4.2259;-1.776,-.3649,-4.3638;-1.4663,-1.5656,-4.993;-.1994,-1.8191,-5.5108;.7939,-.8622,-5.3472;-.9907,1.5224,-3.6948;-2.7803,-.2019,-3.9719;-2.4963,-2.6007,-5.0948;.0009,-2.7667,-6.0139;1.8027,-1.066,-5.7105;2.2664,-1.7064,5.0315;2.3335,-3.593,4.0116;-2.3276,-3.4869,-5.9056;-3.4573,-2.5197,-4.3549;7.1165,1.0949,-1.5483;6.1664,1.5036,-2.5291;8.4989,1.3403,-1.7722;8.9312,1.9414,-2.9289;9.2171,1.0279,-1.0078;9.9979,2.1178,-3.0934;6.6487,2.1055,-3.7249;7.9925,2.3174,-3.9194;5.9346,2.3896,-4.5012;8.3403,2.7732,-4.8508;3.5233,3.1942,-3.4438;2.4194,3.6204,-4.2402;4.3838,4.1931,-2.9066;4.1939,5.5242,-3.193;5.2061,3.8963,-2.2536;4.8721,6.2703,-2.7689;2.2564,5.0034,-4.5288;3.1276,5.938,-4.0261;1.4129,5.3113,-5.1545;2.9919,6.9991,-4.2538;-4.4886,-2.3334,-.3102;-4.4209,-3.0965,-1.1038;-5.0158,-2.7633,.557;-5.1247,-1.5206,-.7089;-2.1949,-1.47,-1.0987;-2.3608,-.4314,-1.4291;-1.1233,-1.558,-.8713;-2.3914,-2.1103,-1.9651;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650067595201</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003328811653 0.000586142346 0.020439938798 0.005336834220</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029950655 -0.002005470 0.000143898 0.000157816 0.000207767 0.000294580 0.000310485 0.000353537 0.000511741 0.000564373 0.000713836 0.000767672 0.000801887 0.000839221 0.000891416 0.000954064 0.001087560 0.001128023 0.001225768 0.001259921 0.001340494 0.001349759 0.001618607 0.001674332 0.001924367 0.002083007 0.002213169 0.002240908 0.002383896 0.002561358 0.002905754 0.003031186 0.003295480 0.003788745 0.003875732 0.004096494 0.004682947 0.005376014 0.005533691 0.005745054 0.006195276 0.006498618 0.007214076 0.007226877 0.007908247 0.008281720 0.008889286 0.009527455 0.009830714 0.010870348 0.011578314 0.012079647 0.012840275 0.013266957 0.013728702 0.013944407 0.014520781 0.014888709 0.015203292 0.015439523 0.016085153 0.016618298 0.017486985 0.017806170 0.018202927 0.018648893 0.019573266 0.020784420 0.020999394 0.021278491 0.022482291 0.022956786 0.024196033 0.025855853 0.026345190 0.026836099 0.028279040 0.028783267 0.030681630 0.031399736 0.031866773 0.033348463 0.033736625 0.034919232 0.037217282 0.038038901 0.039147026 0.039211370 0.040776126 0.041019583 0.043269963 0.043731696 0.045329751 0.048333802 0.049068854 0.049459932 0.049988651 0.050984698 0.052118400 0.052332450 0.052391660 0.052592623 0.053443279 0.054017306 0.054204393 0.054730101 0.055155180 0.056021610 0.056365020 0.056471381 0.057137259 0.058431622 0.059462276 0.060380564 0.060987347 0.061353956 0.061870971 0.062304227 0.064267164 0.064902036 0.065692325 0.065856258 0.066733214 0.071730460 0.073779508 0.074759673 0.076898929 0.080370043 0.083632638 0.084999088 0.085533676 0.086281546 0.087296990 0.089702582 0.090678963 0.093404088 0.094500198 0.095558919 0.095823818 0.097038853 0.097380565 0.098205135 0.098864008 0.099254554 0.099905362 0.100709197 0.101448838 0.102345187 0.102992729 0.103725057 0.104375814 0.106048362 0.106570044 0.106966195 0.108643778 0.109659312 0.110383216 0.112196997 0.113109769 0.113637878 0.116957313 0.118527536 0.119307963 0.120990742 0.123405650 0.124939321 0.125866884 0.130466871 0.131554766 0.134777553 0.136265605 0.141791108 0.142396162 0.145197477 0.145965146 0.146543894 0.147014730 0.150378734 0.152796161 0.157074138 0.160011630 0.172088803 0.172811336 0.175670823 0.182700805 0.183131894 0.186067986 0.186833078 0.191009664 0.192975526 0.196534796 0.197752969 0.200744936 0.204734068 0.206751133 0.209115463 0.209612136 0.212237087 0.212578352 0.216151704 0.218044685 0.224123616 0.224930490 0.229685837 0.233689066 0.234316090 0.234921908 0.243572615 0.254242600 0.256522092 0.259963405 0.264815995 0.278330093 0.282226950 0.285984100 0.288051126 0.292142466 0.299048733 0.303867723 0.304552809 0.305218103 0.312768359 0.314580696 0.321491315 0.321671572 0.328841663 0.343952103 0.346704531 0.349283371 0.350328369 0.354305383 0.360762137 0.361495773 0.369790859 0.377376590 0.386202530 0.406668773 0.421747973 0.425362572 0.450453666 0.465135616 0.468609593 0.475587992 0.478248030 0.478979750 0.486374435 0.499296649 0.506783841 0.532319624 0.562064104 0.565622494 0.582135485 0.590280139 0.592153752 0.602977067 0.636665704 0.640358573 0.643932531 0.662153246 0.671612438 0.680372376 0.683717450 0.691229490 0.696815870 0.703815330 0.712652177 0.722264823 0.738631870 0.749932618 0.759272047 0.771843907 0.776654673 0.804109745 0.808762676 0.812218534 0.813146705 0.819849856 0.820508022 0.828980748 0.830465520 0.831451453 0.840373045 0.844145094 0.844910839 0.849391328 0.857390656 0.862479217 0.864614011 0.870378297 0.873778251 0.883285519 0.887395157 0.891452812 0.895485629 0.917035835 0.922102201 0.930368192 0.932241504 0.963775216 0.975194144 0.983612702 0.999115276 1.009130159 1.024022588 1.039391052 1.046834185 1.053191408 1.059442992 1.085268783 1.085958381 1.094871412 1.104742775 1.110188597 1.112107588 1.122684540 1.123558194 1.134993864 1.138962271 1.169954918 1.170559429 1.178972162 1.185470856 1.194054643 1.209852624 1.219880032 1.239991709 1.295273297 1.311386070 1.315101856 1.323850698 1.325294669 1.326460153 1.332905046 1.340342111 1.341696721 1.355364737 1.374673527 1.380028213 1.380901507 1.381164160 1.392751822 1.418367899 1.550979585 1.659892480 1.769351940</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">50</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34381988" y3="0.11207107" z3="-0.19895952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.40020512" y3="0.14012411" z3="0.38625498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6666886" y3="0.43236348" z3="-0.37140732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76871388" y3="1.26547644" z3="-2.29699195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40178654" y3="0.51439249" z3="-1.19193066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74937014" y3="0.90570367" z3="-3.67427994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.69142987" y3="1.79075116" z3="-3.18395681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.4624885" y3="2.66474969" z3="-4.6849511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59387497" y3="1.32779605" z3="-4.39594997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.59249133" y3="3.01267936" z3="-5.25053653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.89764378" y3="-0.42255343" z3="-3.41374006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09789464" y3="0.17977384" z3="-0.99227056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.37927116" y3="-0.984314" z3="-1.95084892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91057462" y3="-0.83852592" z3="-1.76900075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07796715" y3="-2.3077789" z3="-1.76898121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13884236" y3="-3.65229872" z3="0.69175962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.07192682" y3="-5.13239942" z3="-4.76210809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.17255933" y3="-4.91063485" z3="-3.71967069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.80952936" y3="-4.31619231" z3="-1.0872473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.83241966" y3="-4.48826759" z3="-2.85100305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.4869375" y3="-5.06124256" z3="-3.27331538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.80664202" y3="-4.7592773" z3="-1.9516746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.52595801" y3="-4.20483836" z3="-1.51827767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.86320966" y3="-4.36020497" z3="-3.18947743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.27024672" y3="-5.38453686" z3="-3.96230756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.84257389" y3="-4.84578949" z3="-1.61523612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01871004" y3="-3.90922906" z3="0.24356176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16718077" y3="-3.73336332" z3="0.88471002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04199934" y3="-4.21044602" z3="0.44025555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16922532" y3="-3.61846822" z3="2.35329437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23594461" y3="-3.47389925" z3="5.15292011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35414301" y3="-3.8902424" z3="3.05262433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01794266" y3="-3.27748218" z3="3.07922349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04863857" y3="-3.20536033" z3="4.46878014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38616354" y3="-3.82096831" z3="4.44271116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25658382" y3="-4.16639335" z3="2.50020611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06772817" y3="-3.08339232" z3="2.57630084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.13127855" y3="-2.95624489" z3="5.00966889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31451654" y3="-4.04544241" z3="4.97511299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25920171" y3="-3.4259118" z3="6.24518918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42283131" y3="-3.8277256" z3="-0.59772773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17275886" y3="-3.28868336" z3="-1.03160981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52387747" y3="0.34095428" z3="-4.6959411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.11072733" y3="-1.81580073" z3="0.04779572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97622316" y3="-1.08867316" z3="1.22904622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.93756813" y3="-0.41825858" z3="1.59665331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.50193622" y3="0.52268978" z3="1.30881683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.6368486" y3="1.46638215" z3="-0.28930712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.90762241" y3="-0.67620363" z3="1.42754582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.52267437" y3="1.66664716" z3="2.79194792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.96540877" y3="-1.12822435" z3="2.11007785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.77802133" y3="-0.5337734" z3="3.38459686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.33676496" y3="0.82068105" z3="-1.13309776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.07268605" y3="2.31478838" z3="-0.25111218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.6502929" y3="1.87692424" z3="-0.44820568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.97667359" y3="-1.0534887" z3="2.46103804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.8550468" y3="-0.16909629" z3="1.17410235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80198082" y3="-1.5130802" z3="0.71854699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.5415888" y3="1.09254764" z3="3.73532847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.38554606" y3="2.29645119" z3="2.79988955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.39752072" y3="2.34089373" z3="2.77659996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.91002965" y3="-0.97203225" z3="3.90241702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.69635866" y3="-0.74967901" z3="3.94667583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.6412966" y3="0.55584801" z3="3.2891854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82209628" y3="-0.60777632" z3="0.99825297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.43253786" y3="-1.94899545" z3="0.89725383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77405864" y3="-2.5754651" z3="1.94839709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52023963" y3="-1.8464182" z3="3.10619998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.95569716" y3="-0.53387897" z3="3.26347327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61510757" y3="0.07831711" z3="2.20232251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.57486953" y3="-2.4773803" z3="-0.04645249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40895362" y3="-3.59882243" z3="1.85370731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65571462" y3="-2.43563398" z3="4.13373079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.73670143" y3="0.00493776" z3="4.18600119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.92871937" y3="1.12230294" z3="2.28800297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77537118" y3="0.5822823" z3="-4.22883685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77297624" y3="-0.3737981" z3="-4.36821096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.46098018" y3="-1.57247436" z3="-4.99871556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.19401165" y3="-1.82286832" z3="-5.51711899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.79744354" y3="-0.86570997" z3="-5.35276939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.9894075" y3="1.51224314" z3="-3.69792652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77743637" y3="-0.21333588" z3="-3.97510573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.48943716" y3="-2.61112933" z3="-5.10749883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.00654066" y3="-2.7685838" z3="-6.0192894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8062511" y3="-1.06711357" z3="-5.71766198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.26989957" y3="-1.7142438" z3="5.03300831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33319444" y3="-3.59884388" z3="4.00944212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.31529974" y3="-3.49832457" z3="-5.91423453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45523529" y3="-2.53148258" z3="-4.37531378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.11378247" y3="1.09931588" z3="-1.54458428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1635527" y3="1.50673995" z3="-2.52590675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.49577588" y3="1.34863605" z3="-1.76655576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.92778481" y3="1.95231338" z3="-2.92197904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.21393873" y3="1.03713708" z3="-1.00173271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.99416292" y3="2.13170428" z3="-3.08511187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.64569202" y3="2.1113906" z3="-3.72035639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9891957" y3="2.32704593" z3="-3.91309483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93171547" y3="2.39463456" z3="-4.49711979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.33678278" y3="2.78498073" z3="-4.84350061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.51764639" y3="3.19327062" z3="-3.43963727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.41350486" y3="3.61894501" z3="-4.23607306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.37575799" y3="4.19279525" z3="-2.90004074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.18372111" y3="5.52381646" z3="-3.18444094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.19800968" y3="3.89639006" z3="-2.24679263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.85993891" y3="6.27039238" z3="-2.75831275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.2485456" y3="5.00188819" z3="-4.52293273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.11756764" y3="5.93703261" z3="-4.01800736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.40538862" y3="5.30898505" z3="-5.14943657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.98049045" y3="6.99795048" z3="-4.24456357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.488859" y3="-2.32608278" z3="-0.3064481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.42367816" y3="-3.09113316" z3="-1.09846605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01620286" y3="-2.75343488" z3="0.56176138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12392931" y3="-1.51294657" z3="-0.70610249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19540494" y3="-1.46768856" z3="-1.09897044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35805553" y3="-0.42295637" z3="-1.42493549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11699772" y3="-1.56672674" z3="-0.87932967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40794328" y3="-2.10780444" z3="-1.97173913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3438,.1121,-.199;7.4002,.1401,.3863;6.6667,.4324,-.3714;4.7687,1.2655,-2.297;4.4018,.5144,-1.1919;2.7494,.9057,-3.6743;3.6914,1.7908,-3.184;1.4625,2.6647,-4.685;1.5939,1.3278,-4.3959;.5925,3.0127,-5.2505;2.8976,-.4226,-3.4137;3.0979,.1798,-.9923;2.3793,-.9843,-1.9508;.9106,-.8385,-1.769;3.078,-2.3078,-1.769;-.1388,-3.6523,.6918;.0719,-5.1324,-4.7621;-.1726,-4.9106,-3.7197;-.8095,-4.3162,-1.0872;.8324,-4.4883,-2.851;-1.4869,-5.0612,-3.2733;-1.8066,-4.7593,-1.9517;.526,-4.2048,-1.5183;1.8632,-4.3602,-3.1895;-2.2702,-5.3845,-3.9623;-2.8426,-4.8458,-1.6152;-1.0187,-3.9092,.2436;-2.1672,-3.7334,.8847;-3.042,-4.2104,.4403;-2.1692,-3.6185,2.3533;-2.2359,-3.4739,5.1529;-3.3541,-3.8902,3.0526;-1.0179,-3.2775,3.0792;-1.0486,-3.2054,4.4688;-3.3862,-3.821,4.4427;-4.2566,-4.1664,2.5002;-.0677,-3.0834,2.5763;-.1313,-2.9562,5.0097;-4.3145,-4.0454,4.9751;-2.2592,-3.4259,6.2452;1.4228,-3.8277,-.5977;2.1728,-3.2887,-1.0316;.5239,.341,-4.6959;-3.1107,-1.8158,.0478;-2.9762,-1.0887,1.229;-1.9376,-.4183,1.5967;-.5019,.5227,1.3088;-.6368,1.4664,-.2893;.9076,-.6762,1.4275;-.5227,1.6666,2.7919;-3.9654,-1.1282,2.1101;-3.778,-.5338,3.3846;-.3368,.8207,-1.1331;.0727,2.3148,-.2511;-1.6503,1.8769,-.4482;.9767,-1.0535,2.461;1.855,-.1691,1.1741;.802,-1.5131,.7185;-.5416,1.0925,3.7353;.3855,2.2965,2.7999;-1.3975,2.3409,2.7766;-2.91,-.972,3.9024;-4.6964,-.7497,3.9467;-3.6413,.5558,3.2892;4.8221,-.6078,.9983;4.4325,-1.949,.8973;3.7741,-2.5755,1.9484;3.5202,-1.8464,3.1062;3.9557,-.5339,3.2635;4.6151,.0783,2.2023;4.5749,-2.4774,-.0465;3.409,-3.5988,1.8537;2.6557,-2.4356,4.1337;3.7367,.0049,4.186;4.9287,1.1223,2.288;-.7754,.5823,-4.2288;-1.773,-.3738,-4.3682;-1.461,-1.5725,-4.9987;-.194,-1.8229,-5.5171;.7974,-.8657,-5.3528;-.9894,1.5122,-3.6979;-2.7774,-.2133,-3.9751;-2.4894,-2.6111,-5.1075;.0065,-2.7686,-6.0193;1.8063,-1.0671,-5.7177;2.2699,-1.7142,5.033;2.3332,-3.5988,4.0094;-2.3153,-3.4983,-5.9142;-3.4552,-2.5315,-4.3753;7.1138,1.0993,-1.5446;6.1636,1.5067,-2.5259;8.4958,1.3486,-1.7666;8.9278,1.9523,-2.922;9.2139,1.0371,-1.0017;9.9942,2.1317,-3.0851;6.6457,2.1114,-3.7204;7.9892,2.327,-3.9131;5.9317,2.3946,-4.4971;8.3368,2.785,-4.8435;3.5176,3.1933,-3.4396;2.4135,3.6189,-4.2361;4.3758,4.1928,-2.9;4.1837,5.5238,-3.1844;5.198,3.8964,-2.2468;4.8599,6.2704,-2.7583;2.2485,5.0019,-4.5229;3.1176,5.937,-4.018;1.4054,5.309,-5.1494;2.9805,6.998,-4.2446;-4.4889,-2.3261,-.3064;-4.4237,-3.0911,-1.0985;-5.0162,-2.7534,.5618;-5.1239,-1.5129,-.7061;-2.1954,-1.4677,-1.099;-2.3581,-.423,-1.4249;-1.117,-1.5667,-.8793;-2.4079,-2.1078,-1.9717;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650118459713</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003502110202 0.000428653737 0.015076104833 0.005337850583</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029951602 -0.001203705 0.000145762 0.000159753 0.000207738 0.000299820 0.000310515 0.000354014 0.000513167 0.000564372 0.000725774 0.000770032 0.000806347 0.000861199 0.000892891 0.000957373 0.001087556 0.001128218 0.001232361 0.001266228 0.001340488 0.001355857 0.001618595 0.001678143 0.001927280 0.002084040 0.002213178 0.002251913 0.002383921 0.002576453 0.002936867 0.003038795 0.003295572 0.003789013 0.003878918 0.004099040 0.004726312 0.005380155 0.005533732 0.005747944 0.006206006 0.006499073 0.007223445 0.007230604 0.007908053 0.008325943 0.008893796 0.009531371 0.009832400 0.010888606 0.011581049 0.012176195 0.012840185 0.013268695 0.013801815 0.014209182 0.014543930 0.014888819 0.015204798 0.015440332 0.016086656 0.016634523 0.017489546 0.017871404 0.018218902 0.018662078 0.019572048 0.020797144 0.021008324 0.021529907 0.022582065 0.023000734 0.024196190 0.025856878 0.026345397 0.026835727 0.028280495 0.028783481 0.030681727 0.031400865 0.031867784 0.033350172 0.033738889 0.034919259 0.037225301 0.038041237 0.039148384 0.039211373 0.040775864 0.041007293 0.043272430 0.043731623 0.045333323 0.048334125 0.049069073 0.049459939 0.049988563 0.050984789 0.052119117 0.052332457 0.052391636 0.052596454 0.053458893 0.054017471 0.054204156 0.054730061 0.055156532 0.056021419 0.056364997 0.056471318 0.057137590 0.058431871 0.059462954 0.060387138 0.061017720 0.061369369 0.061909583 0.062316749 0.064277848 0.064904120 0.065705155 0.065856569 0.066732984 0.071730038 0.073779755 0.074760353 0.076900753 0.080373239 0.083632624 0.085001263 0.085536721 0.086281217 0.087299033 0.089705472 0.090678708 0.093417716 0.094500286 0.095559601 0.095823826 0.097067568 0.097380519 0.098206136 0.098895284 0.099256777 0.099905308 0.100712633 0.101448960 0.102350020 0.102992721 0.103725576 0.104375782 0.106050742 0.106573890 0.106978940 0.108727636 0.109672219 0.110387066 0.112209088 0.113119335 0.113687630 0.116977608 0.118533593 0.119311369 0.121023947 0.123406374 0.124940958 0.125867553 0.130472983 0.131554573 0.134778716 0.136359552 0.141795940 0.142396146 0.145205667 0.145965680 0.146547780 0.147015131 0.150376408 0.152795938 0.157072966 0.160086720 0.172095252 0.172860856 0.175672117 0.182701133 0.183134409 0.186071807 0.186842943 0.191009763 0.193044884 0.196534978 0.197773560 0.200914966 0.204739441 0.206751196 0.209124756 0.209612225 0.212240574 0.212579631 0.216332265 0.218044725 0.224160934 0.224931149 0.229687824 0.233707183 0.234316365 0.234931424 0.243580004 0.254244271 0.256523470 0.260005376 0.264816129 0.278331901 0.282227038 0.285984370 0.288054110 0.292201549 0.299060287 0.303886618 0.304675561 0.305253422 0.312780865 0.314581415 0.321499173 0.321769391 0.328868719 0.344082709 0.346751274 0.349414931 0.350328337 0.354305912 0.360764530 0.361496018 0.369852871 0.377386999 0.386366111 0.406799794 0.421750385 0.425470757 0.450455944 0.465169072 0.468614329 0.475589502 0.478621673 0.479575624 0.486642335 0.499310427 0.506803894 0.532346104 0.562064272 0.565622955 0.582148502 0.590279548 0.592153977 0.602984726 0.636831225 0.640751304 0.643950894 0.662192366 0.671624897 0.680397090 0.683721797 0.691229562 0.697255341 0.703815380 0.712655466 0.722274359 0.738637854 0.749932685 0.759273407 0.771843977 0.776655354 0.804111115 0.808781382 0.812470570 0.813146753 0.819850792 0.820509709 0.828984186 0.830471314 0.831471857 0.840646671 0.844145483 0.844911931 0.849404843 0.857446336 0.862813447 0.864614006 0.870378013 0.873801760 0.883293592 0.887397620 0.891510994 0.895505750 0.917416901 0.922104395 0.930393996 0.932242907 0.963775644 0.975195423 0.983612719 0.999115327 1.009143654 1.024024665 1.039392671 1.046837807 1.053193915 1.059444452 1.085271427 1.085961568 1.094873380 1.104742861 1.110198163 1.112107873 1.122687494 1.123561058 1.134993865 1.138962835 1.170026005 1.170563789 1.178979972 1.185470857 1.194054734 1.209900339 1.219880624 1.239991431 1.295278106 1.311397236 1.315102444 1.323864141 1.325295419 1.326460649 1.332905258 1.340342121 1.341696898 1.355366510 1.374673526 1.380256778 1.380921653 1.382164563 1.392864136 1.418371903 1.550979820 1.659892443 1.769378833</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">51</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34276949" y3="0.11016022" z3="-0.19806911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39842438" y3="0.14325526" z3="0.38929558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.66494548" y3="0.43429442" z3="-0.36884731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76677225" y3="1.26461869" z3="-2.29512645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40061164" y3="0.51117261" z3="-1.19144951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74949459" y3="0.90234826" z3="-3.67433686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.68921189" y3="1.78874592" z3="-3.18218638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.46000516" y3="2.65967414" z3="-4.68398845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59359671" y3="1.3230505" z3="-4.3958795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.58969387" y3="3.00670357" z3="-5.24973217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.90050627" y3="-0.42604665" z3="-3.41530103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09731447" y3="0.173572" z3="-0.99306555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3801891" y3="-0.98971593" z3="-1.95382291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91120878" y3="-0.84416778" z3="-1.77361841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07842296" y3="-2.31345505" z3="-1.77249119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14037482" y3="-3.65117213" z3="0.69136287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.06409659" y3="-5.13741967" z3="-4.76158049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.17917616" y3="-4.91408957" z3="-3.71919053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.81305185" y3="-4.31562666" z3="-1.08685176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.82721124" y3="-4.49244103" z3="-2.85171476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.49352865" y3="-5.06190508" z3="-3.27163798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.81171119" y3="-4.75790513" z3="-1.95009147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.52230974" y3="-4.2069847" z3="-1.51904716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85805678" y3="-4.36663667" z3="-3.19109004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.27774173" y3="-5.38503398" z3="-3.95956298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.84756447" y3="-4.84229646" z3="-1.61275741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02095062" y3="-3.90654674" z3="0.24348341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16898694" y3="-3.72838231" z3="0.88503819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04454892" y3="-4.20474927" z3="0.44137311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17014454" y3="-3.61347993" z3="2.35376375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23538956" y3="-3.468546" z3="5.15354499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35554876" y3="-3.88189863" z3="3.05359522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0175567" y3="-3.27598422" z3="3.07937229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04751645" y3="-3.20366111" z3="4.46897185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38686924" y3="-3.8123747" z3="4.44371674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2590273" y3="-4.15555582" z3="2.50153838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06683336" y3="-3.08508847" z3="2.57620639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1292072" y3="-2.95731409" z3="5.00958429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31570854" y3="-4.03408943" z3="4.9764502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25812082" y3="-3.42032533" z3="6.2458306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42068992" y3="-3.83054773" z3="-0.59959663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17126401" y3="-3.29334701" z3="-1.03443793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5255396" y3="0.33518145" z3="-4.69777048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.11037452" y3="-1.81076178" z3="0.04761237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97241596" y3="-1.08260978" z3="1.22851086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.93197016" y3="-0.41385179" z3="1.59417806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.49401485" y3="0.5230685" z3="1.30512403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.62820864" y3="1.46551165" z3="-0.29378383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.91169182" y3="-0.68017432" z3="1.42429493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.51017151" y3="1.66804084" z3="2.78749804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.96038723" y3="-1.11947167" z3="2.1111883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.76992589" y3="-0.52464347" z3="3.3851701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.32675838" y3="0.8208322" z3="-1.13646654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.07706695" y3="2.31463298" z3="-0.2560923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.64093974" y3="1.87197231" z3="-0.45396877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.97887365" y3="-1.05831264" z3="2.45761023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.8606834" y3="-0.17557986" z3="1.1718337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80405088" y3="-1.51631465" z3="0.71466354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.53033038" y3="1.0946727" z3="3.73129462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.40028085" y3="2.29465704" z3="2.79430271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.38263672" y3="2.34537606" z3="2.77233301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.90214381" y3="-0.96440667" z3="3.90205783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.68789368" y3="-0.73829807" z3="3.94872257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.63116033" y3="0.56465198" z3="3.2889659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82192446" y3="-0.61159877" z3="0.99831886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.43117857" y3="-1.95236537" z3="0.89540032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77344671" y3="-2.58012429" z3="1.94622624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52156385" y3="-1.8528608" z3="3.10561914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.9583179" y3="-0.54096377" z3="3.26472128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61696169" y3="0.07255026" z3="2.20385031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5718172" y3="-2.47923186" z3="-0.04947446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40733859" y3="-3.60301224" z3="1.8501423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65752884" y3="-2.44300441" z3="4.13304066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.74083729" y3="-0.00358394" z3="4.18845878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.93144551" y3="1.11616235" z3="2.29093781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77441939" y3="0.57541069" z3="-4.23765604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77071328" y3="-0.38253212" z3="-4.38037112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45752196" y3="-1.58030671" z3="-5.01124376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.18980886" y3="-1.82999494" z3="-5.52598326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.80097519" y3="-0.87083114" z3="-5.3560519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99153418" y3="1.50462941" z3="-3.70288193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77558515" y3="-0.22323584" z3="-3.98871402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.48419301" y3="-2.61703652" z3="-5.11520411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.01278163" y3="-2.77489798" z3="-6.02901693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.81073443" y3="-1.07098666" z3="-5.71768424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.27472814" y3="-1.72315221" z3="5.03496326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33236893" y3="-3.60529137" z3="4.00608141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.30816464" y3="-3.50517631" z3="-5.92058239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44991754" y3="-2.5363673" z3="-4.38174194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.11146951" y3="1.10385022" z3="-1.54075572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.16113204" y3="1.50990794" z3="-2.52247446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.49297148" y3="1.35743901" z3="-1.76101338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.92438522" y3="1.96403546" z3="-2.91515598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.21122832" y3="1.04694301" z3="-0.99587994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.99041336" y3="2.14678038" z3="-3.07694312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.64265661" y3="2.11765494" z3="-3.71563255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.98573405" y3="2.33748316" z3="-3.90671584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92855696" y3="2.40005121" z3="-4.49260934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.33295284" y3="2.7978039" z3="-4.83610251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.51256669" y3="3.19128486" z3="-3.43567495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.40832176" y3="3.61549204" z3="-4.23271791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.36746417" y3="4.19210084" z3="-2.89297153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.17216307" y3="5.52340245" z3="-3.17465664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.18967443" y3="3.89651508" z3="-2.23929459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.84596422" y3="6.27095554" z3="-2.74617915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.23985499" y3="4.99898076" z3="-4.51656556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.10572029" y3="5.93564135" z3="-4.00841944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.39642767" y3="5.30551992" z3="-5.14304035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.96582924" y3="6.99701078" z3="-4.23250806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49007345" y3="-2.31866096" z3="-0.30377923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.42736723" y3="-3.08498365" z3="-1.09479706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01710634" y3="-2.74342288" z3="0.56597665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12376002" y3="-1.5045894" z3="-0.70386751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19631331" y3="-1.46416118" z3="-1.10076522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36083082" y3="-0.42272663" z3="-1.43081324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.12207855" y3="-1.5562382" z3="-0.87733826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.39947764" y3="-2.10658292" z3="-1.96743136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.1102,-.1981;7.3984,.1433,.3893;6.6649,.4343,-.3688;4.7668,1.2646,-2.2951;4.4006,.5112,-1.1914;2.7495,.9023,-3.6743;3.6892,1.7887,-3.1822;1.46,2.6597,-4.684;1.5936,1.3231,-4.3959;.5897,3.0067,-5.2497;2.9005,-.426,-3.4153;3.0973,.1736,-.9931;2.3802,-.9897,-1.9538;.9112,-.8442,-1.7736;3.0784,-2.3135,-1.7725;-.1404,-3.6512,.6914;.0641,-5.1374,-4.7616;-.1792,-4.9141,-3.7192;-.8131,-4.3156,-1.0869;.8272,-4.4924,-2.8517;-1.4935,-5.0619,-3.2716;-1.8117,-4.7579,-1.9501;.5223,-4.207,-1.519;1.8581,-4.3666,-3.1911;-2.2777,-5.385,-3.9596;-2.8476,-4.8423,-1.6128;-1.021,-3.9065,.2435;-2.169,-3.7284,.885;-3.0445,-4.2047,.4414;-2.1701,-3.6135,2.3538;-2.2354,-3.4685,5.1535;-3.3555,-3.8819,3.0536;-1.0176,-3.276,3.0794;-1.0475,-3.2037,4.469;-3.3869,-3.8124,4.4437;-4.259,-4.1556,2.5015;-.0668,-3.0851,2.5762;-.1292,-2.9573,5.0096;-4.3157,-4.0341,4.9765;-2.2581,-3.4203,6.2458;1.4207,-3.8305,-.5996;2.1713,-3.2933,-1.0344;.5255,.3352,-4.6978;-3.1104,-1.8108,.0476;-2.9724,-1.0826,1.2285;-1.932,-.4139,1.5942;-.494,.5231,1.3051;-.6282,1.4655,-.2938;.9117,-.6802,1.4243;-.5102,1.668,2.7875;-3.9604,-1.1195,2.1112;-3.7699,-.5246,3.3852;-.3268,.8208,-1.1365;.0771,2.3146,-.2561;-1.6409,1.872,-.454;.9789,-1.0583,2.4576;1.8607,-.1756,1.1718;.8041,-1.5163,.7147;-.5303,1.0947,3.7313;.4003,2.2947,2.7943;-1.3826,2.3454,2.7723;-2.9021,-.9644,3.9021;-4.6879,-.7383,3.9487;-3.6312,.5647,3.289;4.8219,-.6116,.9983;4.4312,-1.9524,.8954;3.7734,-2.5801,1.9462;3.5216,-1.8529,3.1056;3.9583,-.541,3.2647;4.617,.0726,2.2039;4.5718,-2.4792,-.0495;3.4073,-3.603,1.8501;2.6575,-2.443,4.133;3.7408,-.0036,4.1885;4.9314,1.1162,2.2909;-.7744,.5754,-4.2377;-1.7707,-.3825,-4.3804;-1.4575,-1.5803,-5.0112;-.1898,-1.83,-5.526;.801,-.8708,-5.3561;-.9915,1.5046,-3.7029;-2.7756,-.2232,-3.9887;-2.4842,-2.617,-5.1152;.0128,-2.7749,-6.029;1.8107,-1.071,-5.7177;2.2747,-1.7232,5.035;2.3324,-3.6053,4.0061;-2.3082,-3.5052,-5.9206;-3.4499,-2.5364,-4.3817;7.1115,1.1039,-1.5408;6.1611,1.5099,-2.5225;8.493,1.3574,-1.761;8.9244,1.964,-2.9152;9.2112,1.0469,-.9959;9.9904,2.1468,-3.0769;6.6427,2.1177,-3.7156;7.9857,2.3375,-3.9067;5.9286,2.4001,-4.4926;8.333,2.7978,-4.8361;3.5126,3.1913,-3.4357;2.4083,3.6155,-4.2327;4.3675,4.1921,-2.893;4.1722,5.5234,-3.1747;5.1897,3.8965,-2.2393;4.846,6.271,-2.7462;2.2399,4.999,-4.5166;3.1057,5.9356,-4.0084;1.3964,5.3055,-5.143;2.9658,6.997,-4.2325;-4.4901,-2.3187,-.3038;-4.4274,-3.085,-1.0948;-5.0171,-2.7434,.566;-5.1238,-1.5046,-.7039;-2.1963,-1.4642,-1.1008;-2.3608,-.4227,-1.4308;-1.1221,-1.5562,-.8773;-2.3995,-2.1066,-1.9674;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650149040377</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002197897650 0.000416191709 0.031319935205 0.005338946734</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029951596 -0.001378333 0.000146250 0.000159852 0.000208805 0.000300596 0.000315822 0.000356093 0.000515531 0.000564841 0.000733467 0.000775510 0.000807775 0.000889426 0.000927442 0.001010635 0.001087784 0.001128319 0.001240161 0.001300824 0.001342250 0.001440079 0.001619207 0.001699299 0.001927315 0.002112787 0.002213477 0.002290201 0.002389208 0.002591297 0.002964035 0.003138995 0.003296408 0.003792006 0.003883179 0.004102084 0.004800019 0.005385562 0.005534174 0.005751261 0.006222760 0.006499145 0.007223872 0.007249846 0.007909345 0.008374913 0.008898807 0.009541623 0.009832465 0.010895619 0.011581010 0.012191780 0.012840764 0.013268633 0.013820434 0.014322005 0.014599312 0.014892803 0.015208047 0.015442215 0.016090823 0.016644183 0.017492674 0.017936644 0.018235579 0.018680572 0.019581102 0.020806335 0.021011393 0.021719116 0.022638313 0.023015813 0.024204561 0.025857234 0.026345566 0.026838857 0.028280937 0.028783546 0.030681722 0.031403032 0.031877007 0.033351982 0.033740661 0.034921093 0.037231613 0.038045968 0.039149026 0.039211107 0.040776556 0.041019424 0.043293816 0.043731605 0.045337666 0.048334343 0.049069499 0.049459923 0.049991354 0.050984839 0.052119362 0.052332471 0.052391612 0.052598381 0.053469944 0.054018980 0.054217812 0.054730630 0.055156514 0.056023517 0.056364993 0.056471281 0.057137716 0.058432162 0.059462861 0.060408356 0.061046010 0.061368442 0.061929065 0.062322031 0.064333432 0.064906708 0.065713009 0.065856826 0.066741118 0.071736025 0.073780885 0.074766718 0.076902006 0.080390599 0.083632648 0.085003805 0.085554976 0.086284695 0.087310126 0.089711228 0.090685776 0.093440634 0.094501123 0.095559857 0.095823868 0.097144556 0.097380623 0.098207412 0.098986773 0.099261738 0.099905970 0.100717093 0.101449979 0.102356716 0.102993744 0.103727101 0.104376260 0.106052256 0.106579965 0.106978872 0.108795860 0.109681638 0.110390830 0.112215640 0.113123923 0.113744673 0.116990465 0.118547659 0.119311236 0.121069894 0.123409132 0.124942314 0.125867716 0.130478263 0.131556135 0.134780252 0.136502484 0.141802679 0.142396216 0.145226719 0.145966358 0.146566496 0.147038379 0.150412559 0.152798391 0.157157281 0.160110031 0.172094981 0.172884192 0.175676149 0.182701357 0.183159613 0.186072937 0.186843146 0.191010031 0.193074008 0.196535134 0.197791824 0.201064917 0.204741865 0.206751235 0.209169960 0.209612226 0.212242147 0.212582637 0.216385800 0.218044733 0.224174697 0.224933230 0.229687850 0.233714592 0.234316567 0.234934394 0.243588997 0.254253130 0.256523549 0.260047958 0.264818630 0.278333680 0.282227052 0.285984692 0.288054091 0.292242457 0.299063254 0.303886233 0.304709962 0.305263612 0.312785995 0.314581619 0.321499469 0.321821748 0.328886027 0.344105153 0.346758249 0.349544155 0.350333216 0.354306791 0.360764550 0.361496059 0.370106065 0.377386543 0.386392891 0.406814793 0.421750353 0.425494882 0.450457192 0.465171574 0.468617732 0.475589822 0.478635101 0.479962178 0.486806929 0.499344543 0.506811362 0.532345495 0.562065216 0.565630187 0.582290032 0.590371119 0.592154091 0.603014374 0.636905684 0.640958923 0.643951321 0.662333442 0.671677799 0.680509013 0.683722501 0.691229711 0.697400156 0.703815638 0.712721756 0.722292245 0.738645001 0.749932685 0.759274301 0.771844062 0.776655615 0.804117278 0.808795346 0.812556180 0.813151947 0.819850938 0.820510084 0.828999759 0.830473485 0.831489991 0.840817667 0.844159035 0.844912073 0.849439735 0.857477407 0.863047651 0.864614053 0.870379869 0.873805638 0.883296342 0.887398036 0.891528902 0.895527357 0.917619411 0.922107421 0.930407717 0.932243919 0.963775687 0.975197238 0.983615169 0.999115345 1.009196596 1.024030366 1.039400662 1.046844218 1.053199420 1.059446557 1.085273222 1.085961556 1.094925107 1.104743014 1.110270415 1.112111685 1.122692730 1.123565461 1.134993875 1.138962929 1.170104155 1.170569552 1.178988946 1.185470929 1.194055014 1.210033051 1.219881642 1.240001653 1.295278402 1.311580153 1.315409493 1.323865424 1.325302682 1.326461982 1.332905232 1.340342864 1.341697178 1.355366551 1.374673502 1.380286305 1.380922681 1.382385771 1.392865973 1.418372398 1.550980550 1.659892426 1.769449513</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">52</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34178295" y3="0.10811421" z3="-0.19751034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39673429" y3="0.14597422" z3="0.39194866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.66325295" y3="0.43587388" z3="-0.36664263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76468984" y3="1.26374173" z3="-2.29368203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39944654" y3="0.50795541" z3="-1.19129937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7485807" y3="0.90010829" z3="-3.67482091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.68652391" y3="1.7872277" z3="-3.18055329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.45692002" y3="2.65723087" z3="-4.68259396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5926487" y3="1.32026063" z3="-4.39698708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.58645576" y3="3.00331439" z3="-5.24864017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.90124955" y3="-0.42835121" z3="-3.41728596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09674633" y3="0.1678352" z3="-0.99402447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38033949" y3="-0.99428622" z3="-1.95688142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91129121" y3="-0.84894242" z3="-1.77742662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07833126" y3="-2.3182755" z3="-1.77641636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14143099" y3="-3.6503891" z3="0.69128846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.05747185" y3="-5.14222809" z3="-4.76060555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.18460675" y3="-4.91762144" z3="-3.71822698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.81578958" y3="-4.3155903" z3="-1.08608077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.8228396" y3="-4.49637715" z3="-2.85191719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.49872236" y3="-5.06338036" z3="-3.26956768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.81546193" y3="-4.75768389" z3="-1.94813417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51927048" y3="-4.20905367" z3="-1.5193507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85351624" y3="-4.3722207" z3="-3.1920968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.28395313" y3="-5.38583714" z3="-3.95675232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.85114658" y3="-4.8404419" z3="-1.61001237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02239257" y3="-3.90533488" z3="0.24416439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16974758" y3="-3.72545796" z3="0.8862184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04635756" y3="-4.20027795" z3="0.44282926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17058128" y3="-3.60931201" z3="2.35468519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23532125" y3="-3.46235329" z3="5.15425052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35655079" y3="-3.87435488" z3="3.05481755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01720713" y3="-3.27416832" z3="3.07984498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04689951" y3="-3.20089806" z3="4.4693559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38762753" y3="-3.80379981" z3="4.44483756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26063186" y3="-4.14630743" z3="2.50314372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06604957" y3="-3.08623773" z3="2.57643286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12797148" y3="-2.95664003" z3="5.00969398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31692781" y3="-4.02288308" z3="4.97781276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25782156" y3="-3.41344616" z3="6.24648603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41889245" y3="-3.83286485" z3="-0.60102726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16981722" y3="-3.29732092" z3="-1.03694525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52624024" y3="0.33146025" z3="-4.7012097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10945802" y3="-1.8062027" z3="0.04837098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96952063" y3="-1.07715992" z3="1.22794791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.92813884" y3="-0.40915813" z3="1.59184602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.48777177" y3="0.5232155" z3="1.3009142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.6189454" y3="1.46516025" z3="-0.29846177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.91494074" y3="-0.68313411" z3="1.42117271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.49951463" y3="1.66993412" z3="2.78202682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.95663073" y3="-1.11177895" z3="2.11160321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.76371543" y3="-0.51603238" z3="3.38468494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.33403205" y3="0.81159012" z3="-1.14350737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.10838688" y3="2.30296599" z3="-0.26627555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.62876227" y3="1.89456905" z3="-0.45117912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.98049352" y3="-1.06134095" z3="2.45452284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.86497236" y3="-0.18030156" z3="1.16958505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80648718" y3="-1.5189086" z3="0.71147215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.52083283" y3="1.09759847" z3="3.72643098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.41291649" y3="2.2935993" z3="2.78760386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.369778" y3="2.34999674" z3="2.76685472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.89621618" y3="-0.95686504" z3="3.90106417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.68145075" y3="-0.72740555" z3="3.94943289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.62289048" y3="0.57287877" z3="3.28721721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82184614" y3="-0.61543138" z3="0.99814575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.43015005" y3="-1.95578559" z3="0.89359838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77298924" y3="-2.58469797" z3="1.94407916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52261704" y3="-1.85903858" z3="3.10475804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.96055943" y3="-0.54776537" z3="3.26549699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.61865702" y3="0.06691301" z3="2.2049717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5695318" y3="-2.4813665" z3="-0.05213644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40602304" y3="-3.60714971" z3="1.8467656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.65890223" y3="-2.4499709" z3="4.13199163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.74435065" y3="-0.01168598" z3="4.19025104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.93396667" y3="1.11015917" z3="2.29338909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77520594" y3="0.56826645" z3="-4.23652938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77000611" y3="-0.39010314" z3="-4.38016993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45337263" y3="-1.58695203" z3="-5.01310639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.18412324" y3="-1.83245614" z3="-5.52962554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.80453645" y3="-0.87309298" z3="-5.36159314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99328767" y3="1.49676784" z3="-3.70354057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77619589" y3="-0.23301797" z3="-3.98995609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.47958479" y3="-2.62729365" z3="-5.12602936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.02110786" y3="-2.77613023" z3="-6.03765867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.81486139" y3="-1.07099377" z3="-5.72489886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.27782779" y3="-1.73135195" z3="5.03537986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33224366" y3="-3.61151162" z3="4.0034636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.29956393" y3="-3.51587748" z3="-5.93182923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44922814" y3="-2.54690844" z3="-4.3983137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.10915332" y3="1.10795229" z3="-1.53731348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.15866692" y3="1.51273162" z3="-2.51944418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.49016497" y3="1.36560881" z3="-1.75578047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.92107582" y3="1.97494963" z3="-2.90863364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.20850461" y3="1.05612439" z3="-0.99030607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.98673289" y3="2.16089858" z3="-3.06904665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.63977009" y3="2.12337111" z3="-3.71125076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.98240615" y3="2.34713724" z3="-3.90064135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92568903" y3="2.40493494" z3="-4.48853796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.3292826" y3="2.80971201" z3="-4.82901212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.50741366" y3="3.1899188" z3="-3.43162801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.40311722" y3="3.61372241" z3="-4.228771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.35978943" y3="4.19126149" z3="-2.88625302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.16216385" y3="5.52255133" z3="-3.16567243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.18188035" y3="3.89614923" z3="-2.23222937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.83391391" y3="6.2705666" z3="-2.73496677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.23236819" y3="4.99706066" z3="-4.51049296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.09588552" y3="5.93424878" z3="-3.99983697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.38892914" y3="5.30284368" z3="-5.13729787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.9541753" y3="6.99554479" z3="-4.22215913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49026458" y3="-2.31216389" z3="-0.3014091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.42964588" y3="-3.08042539" z3="-1.09072479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01794992" y3="-2.73406004" z3="0.56923391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12247151" y3="-1.49770776" z3="-0.7029714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19648357" y3="-1.46317849" z3="-1.10196169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36046108" y3="-0.42133432" z3="-1.43282126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11887309" y3="-1.55999739" z3="-0.88343078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4082541" y3="-2.10726044" z3="-1.97002916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3418,.1081,-.1975;7.3967,.146,.3919;6.6633,.4359,-.3666;4.7647,1.2637,-2.2937;4.3994,.508,-1.1913;2.7486,.9001,-3.6748;3.6865,1.7872,-3.1806;1.4569,2.6572,-4.6826;1.5926,1.3203,-4.397;.5865,3.0033,-5.2486;2.9012,-.4284,-3.4173;3.0967,.1678,-.994;2.3803,-.9943,-1.9569;.9113,-.8489,-1.7774;3.0783,-2.3183,-1.7764;-.1414,-3.6504,.6913;.0575,-5.1422,-4.7606;-.1846,-4.9176,-3.7182;-.8158,-4.3156,-1.0861;.8228,-4.4964,-2.8519;-1.4987,-5.0634,-3.2696;-1.8155,-4.7577,-1.9481;.5193,-4.2091,-1.5194;1.8535,-4.3722,-3.1921;-2.284,-5.3858,-3.9568;-2.8511,-4.8404,-1.61;-1.0224,-3.9053,.2442;-2.1697,-3.7255,.8862;-3.0464,-4.2003,.4428;-2.1706,-3.6093,2.3547;-2.2353,-3.4624,5.1543;-3.3566,-3.8744,3.0548;-1.0172,-3.2742,3.0798;-1.0469,-3.2009,4.4694;-3.3876,-3.8038,4.4448;-4.2606,-4.1463,2.5031;-.066,-3.0862,2.5764;-.128,-2.9566,5.0097;-4.3169,-4.0229,4.9778;-2.2578,-3.4134,6.2465;1.4189,-3.8329,-.601;2.1698,-3.2973,-1.0369;.5262,.3315,-4.7012;-3.1095,-1.8062,.0484;-2.9695,-1.0772,1.2279;-1.9281,-.4092,1.5918;-.4878,.5232,1.3009;-.6189,1.4652,-.2985;.9149,-.6831,1.4212;-.4995,1.6699,2.782;-3.9566,-1.1118,2.1116;-3.7637,-.516,3.3847;-.334,.8116,-1.1435;.1084,2.303,-.2663;-1.6288,1.8946,-.4512;.9805,-1.0613,2.4545;1.865,-.1803,1.1696;.8065,-1.5189,.7115;-.5208,1.0976,3.7264;.4129,2.2936,2.7876;-1.3698,2.35,2.7669;-2.8962,-.9569,3.9011;-4.6815,-.7274,3.9494;-3.6229,.5729,3.2872;4.8218,-.6154,.9981;4.4302,-1.9558,.8936;3.773,-2.5847,1.9441;3.5226,-1.859,3.1048;3.9606,-.5478,3.2655;4.6187,.0669,2.205;4.5695,-2.4814,-.0521;3.406,-3.6071,1.8468;2.6589,-2.45,4.132;3.7444,-.0117,4.1903;4.934,1.1102,2.2934;-.7752,.5683,-4.2365;-1.77,-.3901,-4.3802;-1.4534,-1.587,-5.0131;-.1841,-1.8325,-5.5296;.8045,-.8731,-5.3616;-.9933,1.4968,-3.7035;-2.7762,-.233,-3.99;-2.4796,-2.6273,-5.126;.0211,-2.7761,-6.0377;1.8149,-1.071,-5.7249;2.2778,-1.7314,5.0354;2.3322,-3.6115,4.0035;-2.2996,-3.5159,-5.9318;-3.4492,-2.5469,-4.3983;7.1092,1.108,-1.5373;6.1587,1.5127,-2.5194;8.4902,1.3656,-1.7558;8.9211,1.9749,-2.9086;9.2085,1.0561,-.9903;9.9867,2.1609,-3.069;6.6398,2.1234,-3.7113;7.9824,2.3471,-3.9006;5.9257,2.4049,-4.4885;8.3293,2.8097,-4.829;3.5074,3.1899,-3.4316;2.4031,3.6137,-4.2288;4.3598,4.1913,-2.8863;4.1622,5.5226,-3.1657;5.1819,3.8961,-2.2322;4.8339,6.2706,-2.735;2.2324,4.9971,-4.5105;3.0959,5.9342,-3.9998;1.3889,5.3028,-5.1373;2.9542,6.9955,-4.2222;-4.4903,-2.3122,-.3014;-4.4296,-3.0804,-1.0907;-5.0179,-2.7341,.5692;-5.1225,-1.4977,-.703;-2.1965,-1.4632,-1.102;-2.3605,-.4213,-1.4328;-1.1189,-1.56,-.8834;-2.4083,-2.1073,-1.97;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650163328915</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003774037416 0.000534447464 0.022834429551 0.005337825249</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029954958 -0.002430342 0.000146474 0.000166033 0.000209948 0.000300734 0.000323629 0.000356509 0.000516389 0.000564935 0.000733773 0.000777113 0.000807759 0.000890095 0.000935231 0.001082729 0.001094276 0.001128303 0.001241048 0.001312733 0.001345670 0.001606765 0.001634883 0.001815710 0.001934976 0.002192982 0.002224260 0.002363804 0.002549094 0.002674265 0.002963996 0.003294145 0.003696735 0.003877259 0.004046702 0.004117246 0.004991363 0.005386743 0.005560215 0.005752616 0.006245696 0.006499122 0.007223992 0.007289228 0.007917148 0.008410246 0.008908763 0.009557140 0.009832828 0.010909201 0.011582327 0.012200295 0.012840872 0.013268628 0.013831006 0.014349255 0.014622149 0.014899030 0.015210989 0.015442683 0.016093471 0.016642926 0.017494615 0.018030046 0.018295589 0.018686801 0.019610628 0.020807210 0.021024255 0.021790001 0.022635475 0.023016277 0.024216226 0.025857189 0.026345531 0.026844480 0.028280874 0.028783538 0.030681778 0.031409211 0.031916219 0.033355722 0.033742707 0.034922376 0.037231617 0.038050557 0.039150147 0.039210951 0.040781510 0.041119301 0.043336242 0.043736593 0.045340934 0.048334288 0.049069974 0.049459893 0.050012191 0.050984872 0.052119443 0.052332476 0.052391622 0.052599073 0.053471585 0.054020813 0.054245400 0.054731411 0.055156498 0.056026845 0.056365006 0.056471313 0.057137765 0.058432258 0.059464318 0.060446182 0.061073972 0.061380867 0.061938691 0.062322878 0.064395168 0.064909237 0.065717622 0.065856890 0.066763049 0.071749866 0.073782180 0.074776871 0.076902975 0.080418751 0.083632660 0.085008437 0.085580679 0.086292552 0.087328774 0.089714031 0.090701097 0.093452832 0.094502421 0.095559868 0.095823847 0.097214428 0.097381176 0.098208131 0.099111703 0.099277333 0.099908666 0.100717925 0.101454875 0.102361563 0.102994209 0.103731453 0.104380933 0.106052449 0.106585702 0.106984461 0.108850678 0.109685467 0.110390787 0.112215481 0.113123751 0.113763917 0.116989765 0.118567825 0.119313620 0.121121795 0.123410498 0.124942364 0.125867667 0.130485646 0.131556469 0.134785589 0.136518719 0.141804649 0.142396421 0.145249127 0.145973084 0.146630661 0.147221666 0.150480431 0.152806380 0.157265596 0.160113233 0.172096298 0.172892251 0.175677446 0.182702652 0.183182835 0.186105322 0.186923515 0.191010498 0.193094430 0.196535105 0.197810614 0.201332247 0.204746780 0.206751376 0.209233091 0.209612246 0.212250345 0.212587200 0.216398884 0.218044743 0.224178654 0.224935269 0.229688165 0.233716629 0.234316947 0.234935353 0.243593050 0.254262114 0.256523536 0.260073207 0.264829739 0.278334711 0.282227080 0.285986102 0.288057981 0.292253755 0.299063455 0.303905130 0.304708346 0.305263931 0.312785763 0.314581620 0.321500901 0.321830442 0.328886807 0.344105195 0.346758468 0.349751626 0.350389042 0.354308286 0.360769456 0.361496072 0.371384570 0.377386505 0.386394166 0.406816778 0.421750351 0.425494135 0.450457658 0.465171528 0.468620081 0.475589865 0.478635516 0.480178591 0.486914448 0.499460227 0.506840104 0.532351358 0.562067885 0.565639006 0.582383134 0.591261269 0.592156706 0.603053619 0.636958906 0.641085006 0.643951416 0.662939298 0.671717634 0.681151995 0.683722774 0.691230036 0.697427868 0.703815881 0.712807067 0.722383692 0.738645810 0.749932761 0.759274612 0.771844382 0.776655625 0.804190995 0.808817365 0.812584329 0.813171540 0.819851332 0.820523989 0.829012426 0.830476718 0.831501893 0.840899974 0.844226024 0.844912063 0.849561286 0.857491862 0.863186979 0.864614219 0.870389472 0.873807391 0.883297858 0.887398653 0.891532853 0.895537027 0.917710150 0.922108918 0.930415661 0.932244447 0.963775768 0.975198434 0.983616946 0.999115489 1.009223657 1.024032996 1.039402588 1.046844462 1.053199701 1.059446542 1.085274261 1.085964533 1.095020316 1.104743041 1.110353978 1.112117054 1.122696480 1.123568667 1.134993949 1.138962974 1.170141260 1.170573028 1.178993274 1.185471083 1.194055151 1.210155618 1.219881710 1.240009281 1.295284170 1.311773701 1.315748139 1.323865324 1.325309498 1.326465774 1.332905952 1.340342831 1.341697117 1.355366827 1.374673519 1.380291970 1.380922698 1.382454381 1.392888222 1.418372789 1.550981458 1.659892447 1.769678270</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">53</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34079865" y3="0.10576676" z3="-0.19712342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39509915" y3="0.14822367" z3="0.39423804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.66158724" y3="0.43714537" z3="-0.36468984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76266223" y3="1.26297157" z3="-2.2920891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39828783" y3="0.50467745" z3="-1.19113666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7482563" y3="0.89758734" z3="-3.67522793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.68403248" y3="1.78579046" z3="-3.17868883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.4538597" y3="2.65394529" z3="-4.68082705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59215382" y3="1.31652081" z3="-4.39761381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.58322263" y3="2.99961858" z3="-5.24684849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.90302321" y3="-0.4310366" z3="-3.41937744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09612814" y3="0.16182194" z3="-0.99503828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38105012" y3="-0.99924738" z3="-1.96025262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91178591" y3="-0.85432946" z3="-1.78170556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07864337" y3="-2.32349192" z3="-1.78077934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14283607" y3="-3.64897151" z3="0.69095185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.04985664" y3="-5.1458581" z3="-4.7601859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.19085651" y3="-4.92042825" z3="-3.71768914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.81904348" y3="-4.31509018" z3="-1.08545239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.81787927" y3="-4.49980327" z3="-2.85251727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.50477731" y3="-5.06399896" z3="-3.2677503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.82000622" y3="-4.75671283" z3="-1.94632437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51585846" y3="-4.21092966" z3="-1.51997077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84843632" y3="-4.37726726" z3="-3.1936865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.2910141" y3="-5.38578239" z3="-3.95411071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.85556613" y3="-4.83769281" z3="-1.60733601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02435122" y3="-3.90302212" z3="0.2444122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.171535" y3="-3.72032802" z3="0.88649025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0485652" y3="-4.19511281" z3="0.44419243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17147131" y3="-3.60421309" z3="2.355231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23487152" y3="-3.45645199" z3="5.15495746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35788734" y3="-3.86606573" z3="3.05581439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01684653" y3="-3.27226805" z3="3.08012429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04588966" y3="-3.19852448" z3="4.46968036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38835147" y3="-3.79503235" z3="4.44587327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26294544" y3="-4.13575265" z3="2.50441271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06515622" y3="-3.08748392" z3="2.57651761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1260511" y3="-2.95675488" z3="5.00977535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31809148" y3="-4.0115222" z3="4.97915627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25693639" y3="-3.40708203" z3="6.24720019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41694606" y3="-3.83520023" z3="-0.602732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1683878" y3="-3.30160315" z3="-1.03973919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52761674" y3="0.32600078" z3="-4.70404328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10833374" y3="-1.80203285" z3="0.04855828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96556435" y3="-1.07084995" z3="1.22707603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.92277255" y3="-0.40372419" z3="1.5883272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.47922237" y3="0.52472029" z3="1.29732942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.60945969" y3="1.4651317" z3="-0.30310537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.91921133" y3="-0.68659945" z3="1.41871421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.48829416" y3="1.67213197" z3="2.77762327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.95166046" y3="-1.10283313" z3="2.11194115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.75638263" y3="-0.50665978" z3="3.38456599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.31216955" y3="0.81990686" z3="-1.14436939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.09465843" y3="2.31044726" z3="-0.26833581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.61861267" y3="1.87173462" z3="-0.46278949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.98296062" y3="-1.0654295" z3="2.45197746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.87090648" y3="-0.18631242" z3="1.16787558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80836719" y3="-1.52185012" z3="0.70838272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.51118569" y3="1.10066214" z3="3.72251005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.4259044" y3="2.29318198" z3="2.78248103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.35655748" y3="2.35470212" z3="2.76170684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.88911693" y3="-0.94890391" z3="3.90027533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.67391931" y3="-0.71606543" z3="3.95038881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.61375641" y3="0.58192563" z3="3.28628882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82180918" y3="-0.61972435" z3="0.99771576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4289901" y3="-1.95963504" z3="0.89126357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7724732" y3="-2.58980647" z3="1.94139321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52396251" y3="-1.86591236" z3="3.10365346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.96327771" y3="-0.55531366" z3="3.26627659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62068817" y3="0.06065989" z3="2.2060639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.56686009" y3="-2.48375176" z3="-0.05558262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40450032" y3="-3.61177962" z3="1.84266632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66056442" y3="-2.45772323" z3="4.13065937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.74852338" y3="-0.02065558" z3="4.19223225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.93692592" y3="1.10351861" z3="2.29594226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77387083" y3="0.56130708" z3="-4.24235908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76749861" y3="-0.39854121" z3="-4.38880242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44951325" y3="-1.59414475" z3="-5.02229788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1800843" y3="-1.83869932" z3="-5.53652452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.80759342" y3="-0.8775032" z3="-5.36429877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99329052" y3="1.48895487" z3="-3.7078778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77357534" y3="-0.24267542" z3="-3.99804569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.47394381" y3="-2.63469249" z3="-5.13435475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.02557869" y3="-2.78142735" z3="-6.04082102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.81818727" y3="-1.07389358" z3="-5.72667007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.28233624" y3="-1.74055825" z3="5.03661309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33129513" y3="-3.61836746" z3="3.99945472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.28917017" y3="-3.52608507" z3="-5.9337182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44743406" y3="-2.55331612" z3="-4.41233844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.10682779" y3="1.11189511" z3="-1.53405769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.15618903" y3="1.51561908" z3="-2.5164417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4873415" y3="1.37360047" z3="-1.7508361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.91767388" y3="1.98590865" z3="-2.90234796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.20576277" y3="1.06493877" z3="-0.98511529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.98296979" y3="2.17507673" z3="-3.06143368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.63672811" y3="2.12930616" z3="-3.70691838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.97893531" y3="2.35702619" z3="-3.89469373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92257919" y3="2.41014394" z3="-4.48441125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.3254336" y3="2.82198345" z3="-4.82202397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.50220332" y3="3.18861203" z3="-3.42715956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.39765054" y3="3.61168011" z3="-4.22435235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.35206362" y3="4.19060977" z3="-2.87903688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.15201845" y3="5.52205227" z3="-3.15602868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.17409878" y3="3.89584122" z3="-2.22480717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.82193062" y3="6.27051812" z3="-2.72328273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.22440801" y3="4.995307" z3="-4.50355761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.08568657" y3="5.93321673" z3="-3.99040651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.38102725" y3="5.30068757" z3="-5.13061437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.9422355" y3="6.99462367" z3="-4.2109984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49089665" y3="-2.30556655" z3="-0.29848752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43279791" y3="-3.07571987" z3="-1.08622604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01858297" y3="-2.7243686" z3="0.57374238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12165171" y3="-1.49049826" z3="-0.7011732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19713994" y3="-1.46119387" z3="-1.10399289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36008599" y3="-0.41937401" z3="-1.43618032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.12062912" y3="-1.55728021" z3="-0.88559864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40802373" y3="-2.10650888" z3="-1.9693558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,.1058,-.1971;7.3951,.1482,.3942;6.6616,.4371,-.3647;4.7627,1.263,-2.2921;4.3983,.5047,-1.1911;2.7483,.8976,-3.6752;3.684,1.7858,-3.1787;1.4539,2.6539,-4.6808;1.5922,1.3165,-4.3976;.5832,2.9996,-5.2468;2.903,-.431,-3.4194;3.0961,.1618,-.995;2.3811,-.9992,-1.9603;.9118,-.8543,-1.7817;3.0786,-2.3235,-1.7808;-.1428,-3.649,.691;.0499,-5.1459,-4.7602;-.1909,-4.9204,-3.7177;-.819,-4.3151,-1.0855;.8179,-4.4998,-2.8525;-1.5048,-5.064,-3.2678;-1.82,-4.7567,-1.9463;.5159,-4.2109,-1.52;1.8484,-4.3773,-3.1937;-2.291,-5.3858,-3.9541;-2.8556,-4.8377,-1.6073;-1.0244,-3.903,.2444;-2.1715,-3.7203,.8865;-3.0486,-4.1951,.4442;-2.1715,-3.6042,2.3552;-2.2349,-3.4565,5.155;-3.3579,-3.8661,3.0558;-1.0168,-3.2723,3.0801;-1.0459,-3.1985,4.4697;-3.3884,-3.795,4.4459;-4.2629,-4.1358,2.5044;-.0652,-3.0875,2.5765;-.1261,-2.9568,5.0098;-4.3181,-4.0115,4.9792;-2.2569,-3.4071,6.2472;1.4169,-3.8352,-.6027;2.1684,-3.3016,-1.0397;.5276,.326,-4.704;-3.1083,-1.802,.0486;-2.9656,-1.0708,1.2271;-1.9228,-.4037,1.5883;-.4792,.5247,1.2973;-.6095,1.4651,-.3031;.9192,-.6866,1.4187;-.4883,1.6721,2.7776;-3.9517,-1.1028,2.1119;-3.7564,-.5067,3.3846;-.3122,.8199,-1.1444;.0947,2.3104,-.2683;-1.6186,1.8717,-.4628;.983,-1.0654,2.452;1.8709,-.1863,1.1679;.8084,-1.5219,.7084;-.5112,1.1007,3.7225;.4259,2.2932,2.7825;-1.3566,2.3547,2.7617;-2.8891,-.9489,3.9003;-4.6739,-.7161,3.9504;-3.6138,.5819,3.2863;4.8218,-.6197,.9977;4.429,-1.9596,.8913;3.7725,-2.5898,1.9414;3.524,-1.8659,3.1037;3.9633,-.5553,3.2663;4.6207,.0607,2.2061;4.5669,-2.4838,-.0556;3.4045,-3.6118,1.8427;2.6606,-2.4577,4.1307;3.7485,-.0207,4.1922;4.9369,1.1035,2.2959;-.7739,.5613,-4.2424;-1.7675,-.3985,-4.3888;-1.4495,-1.5941,-5.0223;-.1801,-1.8387,-5.5365;.8076,-.8775,-5.3643;-.9933,1.489,-3.7079;-2.7736,-.2427,-3.998;-2.4739,-2.6347,-5.1344;.0256,-2.7814,-6.0408;1.8182,-1.0739,-5.7267;2.2823,-1.7406,5.0366;2.3313,-3.6184,3.9995;-2.2892,-3.5261,-5.9337;-3.4474,-2.5533,-4.4123;7.1068,1.1119,-1.5341;6.1562,1.5156,-2.5164;8.4873,1.3736,-1.7508;8.9177,1.9859,-2.9023;9.2058,1.0649,-.9851;9.983,2.1751,-3.0614;6.6367,2.1293,-3.7069;7.9789,2.357,-3.8947;5.9226,2.4101,-4.4844;8.3254,2.822,-4.822;3.5022,3.1886,-3.4272;2.3977,3.6117,-4.2244;4.3521,4.1906,-2.879;4.152,5.5221,-3.156;5.1741,3.8958,-2.2248;4.8219,6.2705,-2.7233;2.2244,4.9953,-4.5036;3.0857,5.9332,-3.9904;1.381,5.3007,-5.1306;2.9422,6.9946,-4.211;-4.4909,-2.3056,-.2985;-4.4328,-3.0757,-1.0862;-5.0186,-2.7244,.5737;-5.1217,-1.4905,-.7012;-2.1971,-1.4612,-1.104;-2.3601,-.4194,-1.4362;-1.1206,-1.5573,-.8856;-2.408,-2.1065,-1.9694;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650178063668</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005095021106 0.000632247172 0.030296124553 0.005337409470</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029959300 -0.002232594 0.000146817 0.000166082 0.000211122 0.000302066 0.000324412 0.000360541 0.000516546 0.000564986 0.000733879 0.000777878 0.000807888 0.000890179 0.000935273 0.001085756 0.001102598 0.001128374 0.001241037 0.001312846 0.001347596 0.001611409 0.001646089 0.001843168 0.001950615 0.002202959 0.002237182 0.002367708 0.002598063 0.002813204 0.002991214 0.003294384 0.003747581 0.003883434 0.004104531 0.004694502 0.005253384 0.005459691 0.005752426 0.006007771 0.006263786 0.006500900 0.007227709 0.007373365 0.007930705 0.008410074 0.008911764 0.009558084 0.009833601 0.010927889 0.011595959 0.012210812 0.012840908 0.013268594 0.013830557 0.014346248 0.014620417 0.014900586 0.015212219 0.015442641 0.016093039 0.016646705 0.017494462 0.018068801 0.018469011 0.018686148 0.019627703 0.020807730 0.021037806 0.021784456 0.022639996 0.023032762 0.024216753 0.025857234 0.026345566 0.026844688 0.028281325 0.028783534 0.030683848 0.031419057 0.031999384 0.033364222 0.033745945 0.034922330 0.037236790 0.038052424 0.039149756 0.039210719 0.040785096 0.041158057 0.043360838 0.043773195 0.045340812 0.048334321 0.049070521 0.049459876 0.050063654 0.050984853 0.052119453 0.052332478 0.052391613 0.052599005 0.053474463 0.054020659 0.054261718 0.054731883 0.055156674 0.056027203 0.056364942 0.056471253 0.057137833 0.058432216 0.059465912 0.060462444 0.061080847 0.061391354 0.061939110 0.062322819 0.064395302 0.064909570 0.065719128 0.065857008 0.066771665 0.071753875 0.073782512 0.074779451 0.076902917 0.080426602 0.083632642 0.085012794 0.085586211 0.086296472 0.087330780 0.089713764 0.090709523 0.093452012 0.094502823 0.095559991 0.095823855 0.097222110 0.097382264 0.098208804 0.099133761 0.099280260 0.099910726 0.100720477 0.101465604 0.102362623 0.102994280 0.103734865 0.104399377 0.106069917 0.106585443 0.107004209 0.108881537 0.109685613 0.110393188 0.112221063 0.113126650 0.113764333 0.116996894 0.118587662 0.119320410 0.121154638 0.123410347 0.124942625 0.125868123 0.130495624 0.131555937 0.134794736 0.136527197 0.141804378 0.142396369 0.145254030 0.146003886 0.146673653 0.147728506 0.150494112 0.152806077 0.157285659 0.160114086 0.172099195 0.172891682 0.175677561 0.182705011 0.183185475 0.186164224 0.187221464 0.191010687 0.193102526 0.196535169 0.197822635 0.201701652 0.204755525 0.206751732 0.209251682 0.209612381 0.212257556 0.212588875 0.216397932 0.218045296 0.224178588 0.224936100 0.229689859 0.233716502 0.234317506 0.234935663 0.243593035 0.254263975 0.256523670 0.260075921 0.264841894 0.278335043 0.282227621 0.285990593 0.288064834 0.292254744 0.299069556 0.303962487 0.304765033 0.305307097 0.312790157 0.314581673 0.321509336 0.321835746 0.328891131 0.344151780 0.346777810 0.349897875 0.350561260 0.354309448 0.360781169 0.361496267 0.374139065 0.377406358 0.386449371 0.406862837 0.421750340 0.425529697 0.450457666 0.465182015 0.468620880 0.475589918 0.478671928 0.480254395 0.486951272 0.499529274 0.506880719 0.532377523 0.562071470 0.565642521 0.582404811 0.592148270 0.593566269 0.603093829 0.636992019 0.641126400 0.643951679 0.664199963 0.671734706 0.682853385 0.683724351 0.691230450 0.697427886 0.703815959 0.712860182 0.722483930 0.738646251 0.749932893 0.759274628 0.771844913 0.776656083 0.804444792 0.808856516 0.812591855 0.813208934 0.819852601 0.820560552 0.829012224 0.830477035 0.831505561 0.840911211 0.844397098 0.844912103 0.849834535 0.857493395 0.863205103 0.864614356 0.870397798 0.873826260 0.883298139 0.887398630 0.891533509 0.895537133 0.917721676 0.922108949 0.930416529 0.932245195 0.963776019 0.975198817 0.983617062 0.999115505 1.009224658 1.024033134 1.039404119 1.046850729 1.053205612 1.059452458 1.085274994 1.085968088 1.095073183 1.104743113 1.110372346 1.112118409 1.122696703 1.123568728 1.134994107 1.138963054 1.170141100 1.170573000 1.178993242 1.185471548 1.194055175 1.210176728 1.219882516 1.240019997 1.295294234 1.311943852 1.316007000 1.323868311 1.325314324 1.326467236 1.332906629 1.340342832 1.341697231 1.355366825 1.374673608 1.380299601 1.380923305 1.382628232 1.392910508 1.418373023 1.550982665 1.659892394 1.769819191</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">54</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34035696" y3="0.10342073" z3="-0.19655559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3940094" y3="0.15068257" z3="0.39662117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.66040328" y3="0.43858242" z3="-0.36260263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76094146" y3="1.26202898" z3="-2.29029985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39755012" y3="0.50123632" z3="-1.19077544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74825546" y3="0.89445288" z3="-3.67522307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.68181185" y3="1.7838563" z3="-3.17675892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.45127466" y3="2.64947139" z3="-4.67938603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59179842" y3="1.31213163" z3="-4.39774897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.58037933" y3="2.99418796" z3="-5.24563304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.90563039" y3="-0.43424212" z3="-3.42091936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09602721" y3="0.15553912" z3="-0.99578977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38202078" y3="-1.0044736" z3="-1.96313917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91257598" y3="-0.859545" z3="-1.78591693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07924121" y3="-2.32903254" z3="-1.78448146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14377335" y3="-3.64764888" z3="0.6907674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.0431104" y3="-5.15064357" z3="-4.75925885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.19637066" y3="-4.92392551" z3="-3.71675198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82174239" y3="-4.31483862" z3="-1.08471426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.81354095" y3="-4.50363371" z3="-2.85287689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.51014173" y3="-5.06543968" z3="-3.26554204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.82394705" y3="-4.7562625" z3="-1.94425594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51294454" y3="-4.21294949" z3="-1.52037283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84404583" y3="-4.38285125" z3="-3.19501067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.29710818" y3="-5.38748032" z3="-3.95076521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.85931411" y3="-4.83570215" z3="-1.60431898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02579219" y3="-3.90093281" z3="0.24479632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17236113" y3="-3.71644796" z3="0.88730957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05031339" y3="-4.19014925" z3="0.44544076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17185443" y3="-3.59938636" z3="2.35588454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23442038" y3="-3.45030181" z3="5.15553711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35887156" y3="-3.85777282" z3="3.05677336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01628349" y3="-3.27021775" z3="3.08041608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04487632" y3="-3.19587971" z3="4.46995067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38891584" y3="-3.78607891" z3="4.44679127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26470706" y3="-4.12536934" z3="2.5056985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06414587" y3="-3.08848146" z3="2.57659708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12428849" y3="-2.95650345" z3="5.0098091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31915393" y3="-3.99988073" z3="4.98029632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25611427" y3="-3.40053826" z3="6.24777787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41536653" y3="-3.83766071" z3="-0.60427406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16744696" y3="-3.30599648" z3="-1.04235625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52903718" y3="0.32061388" z3="-4.70660987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10754631" y3="-1.79750307" z3="0.04847561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96265408" y3="-1.06585043" z3="1.22629964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.91835998" y3="-0.40071655" z3="1.58672874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.47432589" y3="0.52448698" z3="1.2933127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.60329322" y3="1.46324738" z3="-0.3078809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.92216183" y3="-0.68867452" z3="1.41551998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.47835634" y3="1.67427737" z3="2.77232927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.94804018" y3="-1.09490407" z3="2.11200672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.74980033" y3="-0.49769241" z3="3.3838051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.31707135" y3="0.80857091" z3="-1.15103139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.12495456" y3="2.30043528" z3="-0.27627181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.6121323" y3="1.8934572" z3="-0.46391591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.98456645" y3="-1.06737255" z3="2.4489261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.87487706" y3="-0.19031253" z3="1.16534504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81065382" y3="-1.52385728" z3="0.70556786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.50256963" y3="1.10400433" z3="3.71791432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.43827146" y3="2.29202064" z3="2.77601824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.34420041" y3="2.36011462" z3="2.75644715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.88270127" y3="-0.94102927" z3="3.89885226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.66705971" y3="-0.70457405" z3="3.95108036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.60497989" y3="0.5905196" z3="3.28421075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8222738" y3="-0.62413921" z3="0.99737182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42821174" y3="-1.96354243" z3="0.88882776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77203801" y3="-2.59503967" z3="1.93835766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52520567" y3="-1.87304601" z3="3.10215483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.9660199" y3="-0.56320864" z3="3.26686536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62298011" y3="0.05414322" z3="2.20717805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.56463065" y3="-2.48607678" z3="-0.05912102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40293848" y3="-3.61646202" z3="1.83801372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66209314" y3="-2.46582686" z3="4.12885038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.75270499" y3="-0.03010671" z3="4.19404718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.94016876" y3="1.09657722" z3="2.29866289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77360077" y3="0.55514749" z3="-4.24970745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76634987" y3="-0.4049739" z3="-4.3980063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44677429" y3="-1.60051" z3="-5.02977797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.17619517" y3="-1.84441062" z3="-5.54099492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.81073484" y3="-0.8828381" z3="-5.36685926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99533752" y3="1.48250863" z3="-3.714317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77327263" y3="-0.24946202" z3="-4.01057896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.47026796" y3="-2.64067211" z3="-5.14103046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.03161782" y3="-2.78712991" z3="-6.04697424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.82215248" y3="-1.07886998" z3="-5.72586534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.28650823" y3="-1.75027814" z3="5.03713641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33041496" y3="-3.6254741" z3="3.99514794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.28269858" y3="-3.5338638" z3="-5.93889143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44506113" y3="-2.55718928" z3="-4.41994331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.1048546" y3="1.11615523" z3="-1.53063181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.15395125" y3="1.51870125" z3="-2.51321251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.48479538" y3="1.38219628" z3="-1.74580789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.91432774" y3="1.99766868" z3="-2.8959378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.20344039" y3="1.07440845" z3="-0.97994727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.97919762" y3="2.19027523" z3="-3.05375308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.63370182" y3="2.13568666" z3="-3.70231193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.97539532" y3="2.36766455" z3="-3.88853175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91935884" y3="2.41578094" z3="-4.47990535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.32134688" y3="2.83520835" z3="-4.81477387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.49716" y3="3.18669927" z3="-3.42285954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.39243501" y3="3.60856745" z3="-4.22041714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.34392688" y3="4.18979113" z3="-2.87168907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.14066813" y3="5.52145715" z3="-3.14587324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.16598" y3="3.89576764" z3="-2.21712681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.80814902" y3="6.27082933" z3="-2.71070731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.21585061" y3="4.99252489" z3="-4.4966923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.07405896" y3="5.93173556" z3="-3.98038511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.37218666" y3="5.29726091" z3="-5.1237301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.92783188" y3="6.99349851" z3="-4.19844159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49094488" y3="-2.29940376" z3="-0.29669265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43480344" y3="-3.07099483" z3="-1.0830799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01841679" y3="-2.71584167" z3="0.57672866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.12082972" y3="-1.48402231" z3="-0.70017836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19658989" y3="-1.4588301" z3="-1.1046814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36018063" y3="-0.41845984" z3="-1.43973089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.12072633" y3="-1.55369609" z3="-0.88574037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40626501" y3="-2.10580362" z3="-1.96834404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3404,.1034,-.1966;7.394,.1507,.3966;6.6604,.4386,-.3626;4.7609,1.262,-2.2903;4.3976,.5012,-1.1908;2.7483,.8945,-3.6752;3.6818,1.7839,-3.1768;1.4513,2.6495,-4.6794;1.5918,1.3121,-4.3977;.5804,2.9942,-5.2456;2.9056,-.4342,-3.4209;3.096,.1555,-.9958;2.382,-1.0045,-1.9631;.9126,-.8595,-1.7859;3.0792,-2.329,-1.7845;-.1438,-3.6476,.6908;.0431,-5.1506,-4.7593;-.1964,-4.9239,-3.7168;-.8217,-4.3148,-1.0847;.8135,-4.5036,-2.8529;-1.5101,-5.0654,-3.2655;-1.8239,-4.7563,-1.9443;.5129,-4.2129,-1.5204;1.844,-4.3829,-3.195;-2.2971,-5.3875,-3.9508;-2.8593,-4.8357,-1.6043;-1.0258,-3.9009,.2448;-2.1724,-3.7164,.8873;-3.0503,-4.1901,.4454;-2.1719,-3.5994,2.3559;-2.2344,-3.4503,5.1555;-3.3589,-3.8578,3.0568;-1.0163,-3.2702,3.0804;-1.0449,-3.1959,4.47;-3.3889,-3.7861,4.4468;-4.2647,-4.1254,2.5057;-.0641,-3.0885,2.5766;-.1243,-2.9565,5.0098;-4.3192,-3.9999,4.9803;-2.2561,-3.4005,6.2478;1.4154,-3.8377,-.6043;2.1674,-3.306,-1.0424;.529,.3206,-4.7066;-3.1075,-1.7975,.0485;-2.9627,-1.0659,1.2263;-1.9184,-.4007,1.5867;-.4743,.5245,1.2933;-.6033,1.4632,-.3079;.9222,-.6887,1.4155;-.4784,1.6743,2.7723;-3.948,-1.0949,2.112;-3.7498,-.4977,3.3838;-.3171,.8086,-1.151;.125,2.3004,-.2763;-1.6121,1.8935,-.4639;.9846,-1.0674,2.4489;1.8749,-.1903,1.1653;.8107,-1.5239,.7056;-.5026,1.104,3.7179;.4383,2.292,2.776;-1.3442,2.3601,2.7564;-2.8827,-.941,3.8989;-4.6671,-.7046,3.9511;-3.605,.5905,3.2842;4.8223,-.6241,.9974;4.4282,-1.9635,.8888;3.772,-2.595,1.9384;3.5252,-1.873,3.1022;3.966,-.5632,3.2669;4.623,.0541,2.2072;4.5646,-2.4861,-.0591;3.4029,-3.6165,1.838;2.6621,-2.4658,4.1289;3.7527,-.0301,4.194;4.9402,1.0966,2.2987;-.7736,.5551,-4.2497;-1.7663,-.405,-4.398;-1.4468,-1.6005,-5.0298;-.1762,-1.8444,-5.541;.8107,-.8828,-5.3669;-.9953,1.4825,-3.7143;-2.7733,-.2495,-4.0106;-2.4703,-2.6407,-5.141;.0316,-2.7871,-6.047;1.8222,-1.0789,-5.7259;2.2865,-1.7503,5.0371;2.3304,-3.6255,3.9951;-2.2827,-3.5339,-5.9389;-3.4451,-2.5572,-4.4199;7.1049,1.1162,-1.5306;6.154,1.5187,-2.5132;8.4848,1.3822,-1.7458;8.9143,1.9977,-2.8959;9.2034,1.0744,-.9799;9.9792,2.1903,-3.0538;6.6337,2.1357,-3.7023;7.9754,2.3677,-3.8885;5.9194,2.4158,-4.4799;8.3213,2.8352,-4.8148;3.4972,3.1867,-3.4229;2.3924,3.6086,-4.2204;4.3439,4.1898,-2.8717;4.1407,5.5215,-3.1459;5.166,3.8958,-2.2171;4.8081,6.2708,-2.7107;2.2159,4.9925,-4.4967;3.0741,5.9317,-3.9804;1.3722,5.2973,-5.1237;2.9278,6.9935,-4.1984;-4.4909,-2.2994,-.2967;-4.4348,-3.071,-1.0831;-5.0184,-2.7158,.5767;-5.1208,-1.484,-.7002;-2.1966,-1.4588,-1.1047;-2.3602,-.4185,-1.4397;-1.1207,-1.5537,-.8857;-2.4063,-2.1058,-1.9683;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650222037824</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003631007571 0.000457710399 0.018783895152 0.005338475590</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029959020 -0.001458575 0.000148061 0.000169875 0.000211531 0.000302153 0.000327567 0.000362710 0.000516602 0.000565550 0.000733902 0.000777887 0.000808049 0.000890277 0.000935365 0.001087081 0.001106390 0.001128378 0.001241493 0.001312913 0.001349162 0.001612599 0.001649568 0.001852789 0.001955081 0.002203729 0.002240186 0.002371836 0.002612183 0.002859881 0.003049946 0.003294715 0.003756195 0.003883407 0.004107996 0.004842868 0.005281107 0.005482422 0.005753205 0.006250200 0.006473857 0.006646146 0.007232172 0.007539179 0.007947414 0.008425715 0.008912453 0.009559665 0.009833396 0.010937071 0.011612278 0.012209540 0.012841512 0.013268552 0.013830625 0.014384534 0.014679622 0.014900385 0.015212030 0.015443977 0.016093699 0.016656784 0.017495741 0.018070746 0.018620950 0.018704052 0.019627654 0.020810193 0.021037697 0.021814929 0.022647374 0.023033061 0.024219712 0.025857239 0.026345712 0.026846212 0.028281893 0.028783666 0.030688901 0.031427754 0.032074093 0.033375890 0.033749556 0.034928169 0.037258865 0.038052390 0.039151476 0.039210556 0.040786175 0.041159355 0.043359379 0.043825442 0.045341626 0.048334985 0.049071094 0.049460056 0.050109442 0.050984827 0.052119473 0.052332474 0.052391612 0.052599521 0.053500451 0.054023314 0.054261029 0.054731858 0.055157538 0.056027654 0.056364870 0.056471206 0.057137986 0.058433020 0.059466075 0.060461362 0.061080530 0.061391314 0.061941082 0.062323373 0.064406083 0.064909623 0.065719186 0.065856980 0.066770931 0.071753737 0.073782496 0.074779248 0.076903148 0.080426061 0.083632707 0.085014688 0.085586165 0.086296134 0.087331205 0.089715639 0.090708722 0.093455995 0.094502841 0.095560979 0.095823898 0.097226339 0.097385195 0.098210693 0.099134154 0.099282773 0.099911009 0.100737124 0.101476397 0.102362717 0.102994659 0.103735610 0.104426564 0.106137672 0.106591567 0.107021694 0.108886098 0.109685884 0.110395093 0.112235137 0.113130338 0.113790088 0.117008414 0.118598405 0.119322408 0.121158089 0.123411103 0.124943316 0.125868519 0.130502018 0.131558187 0.134799511 0.136629944 0.141806679 0.142396811 0.145255684 0.146030324 0.146686233 0.148070820 0.150514321 0.152812747 0.157349455 0.160122701 0.172099018 0.172897357 0.175678023 0.182705269 0.183198624 0.186182492 0.187483841 0.191010615 0.193102050 0.196535223 0.197824089 0.201863398 0.204760047 0.206751988 0.209251760 0.209612490 0.212257167 0.212593610 0.216406257 0.218047038 0.224180361 0.224936149 0.229690497 0.233717592 0.234317833 0.234935645 0.243596101 0.254266928 0.256523975 0.260081190 0.264841932 0.278335096 0.282228440 0.285995335 0.288064972 0.292274605 0.299075657 0.303990661 0.304861710 0.305421185 0.312795470 0.314581721 0.321518133 0.321860804 0.328902352 0.344211807 0.346794651 0.349919234 0.350644786 0.354309761 0.360787163 0.361496989 0.376051135 0.377436851 0.386484194 0.406880904 0.421751416 0.425628105 0.450457742 0.465183776 0.468620875 0.475589997 0.478686239 0.480253183 0.486950659 0.499538375 0.506882088 0.532378731 0.562071979 0.565643747 0.582454210 0.592149038 0.595332123 0.603097984 0.636994211 0.641125926 0.643951674 0.665046400 0.671736241 0.683716166 0.684322628 0.691230629 0.697459275 0.703815966 0.712860279 0.722503090 0.738651494 0.749932950 0.759274839 0.771845094 0.776656849 0.804836025 0.808906290 0.812592829 0.813241209 0.819853095 0.820618684 0.829030950 0.830477189 0.831506434 0.840922179 0.844583281 0.844912308 0.850167539 0.857495094 0.863222428 0.864614392 0.870399895 0.873843763 0.883298189 0.887399157 0.891548032 0.895547257 0.917731971 0.922109681 0.930416498 0.932245196 0.963776254 0.975198970 0.983619950 0.999115497 1.009264519 1.024036538 1.039413880 1.046863673 1.053217881 1.059460781 1.085275016 1.085968241 1.095073714 1.104743564 1.110388577 1.112119396 1.122698646 1.123570662 1.134994147 1.138963432 1.170177135 1.170579050 1.178998302 1.185472747 1.194055285 1.210221945 1.219887717 1.240022188 1.295295746 1.311948431 1.316045471 1.323868490 1.325314953 1.326467166 1.332906630 1.340343311 1.341697269 1.355366869 1.374673641 1.380312110 1.380923624 1.382805116 1.392913270 1.418373066 1.550982770 1.659892353 1.769824349</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">55</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34008782" y3="0.10037534" z3="-0.19630575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39310259" y3="0.15242002" z3="0.39869232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65935305" y3="0.43935413" z3="-0.36077289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75916324" y3="1.26075564" z3="-2.28875265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39696741" y3="0.49724349" z3="-1.19070917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74767307" y3="0.89172264" z3="-3.67557582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.67924858" y3="1.78194931" z3="-3.1748076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.44800665" y3="2.64636799" z3="-4.67733873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59094866" y3="1.30867507" z3="-4.39836163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.57685213" y3="2.99025096" z3="-5.24365526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.90709136" y3="-0.43706076" z3="-3.4230572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09611059" y3="0.14874661" z3="-0.99678074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38289843" y3="-1.00981751" z3="-1.96652193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91335826" y3="-0.86506007" z3="-1.78999307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07959102" y3="-2.33477676" z3="-1.78909072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14462628" y3="-3.64664815" z3="0.69108209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.03557521" y3="-5.15527225" z3="-4.75802092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.20251999" y3="-4.92725789" z3="-3.71549513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8246402" y3="-4.31452924" z3="-1.08352288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80871077" y3="-4.50742351" z3="-2.85295752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.51601157" y3="-5.06673157" z3="-3.26291024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.82813826" y3="-4.75572123" z3="-1.9416963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50972499" y3="-4.2149364" z3="-1.52049869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83901368" y3="-4.3882267" z3="-3.1961021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.30415969" y3="-5.38829283" z3="-3.94718355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.86326155" y3="-4.83365751" z3="-1.60070833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02718307" y3="-3.89911819" z3="0.24577591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17322895" y3="-3.71224885" z3="0.88859802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05208188" y3="-4.18477373" z3="0.44729896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17216961" y3="-3.59422585" z3="2.3570748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23399375" y3="-3.44296135" z3="5.15656488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35963061" y3="-3.84924659" z3="3.05838605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01572427" y3="-3.26749002" z3="3.08112231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04393667" y3="-3.19210712" z3="4.47057884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38934782" y3="-3.77638924" z3="4.44830878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26611683" y3="-4.11514953" z3="2.50774246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06321289" y3="-3.08878752" z3="2.57696572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12268983" y3="-2.95480016" z3="5.01008812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32002443" y3="-3.98743936" z3="4.98212015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25544247" y3="-3.3923539" z3="6.24873979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41362871" y3="-3.84001656" z3="-0.6056442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1661793" y3="-3.31045386" z3="-1.04500096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52984163" y3="0.31639367" z3="-4.70906795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10576867" y3="-1.79209228" z3="0.04901794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95862067" y3="-1.05920016" z3="1.22578005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.91339505" y3="-0.39460785" z3="1.5839876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.46597667" y3="0.5266231" z3="1.28922684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.59416768" y3="1.46355065" z3="-0.31336754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.92673192" y3="-0.69066863" z3="1.41316614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.46826452" y3="1.6776001" z3="2.76668969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.9431322" y3="-1.08628287" z3="2.11250852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.74337951" y3="-0.4879934" z3="3.38327063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.30505622" y3="0.81124345" z3="-1.15485034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.11952989" y3="2.30457439" z3="-0.28292378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.60277093" y3="1.87962812" z3="-0.46999434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.98763424" y3="-1.06913986" z3="2.44669542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.88051498" y3="-0.1943819" z3="1.1631573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81338935" y3="-1.52567924" z3="0.70311225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.49369136" y3="1.10850274" z3="3.71293457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.44906215" y3="2.29366406" z3="2.76967036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.33273281" y3="2.36459303" z3="2.74970219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.8768214" y3="-0.93210784" z3="3.89833701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.66052244" y3="-0.69283984" z3="3.95125661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.59694611" y3="0.59980146" z3="3.28219087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82299464" y3="-0.62934046" z3="0.99669884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42751855" y3="-1.96815211" z3="0.88598526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77161306" y3="-2.60098705" z3="1.93486802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52657816" y3="-1.88098736" z3="3.10026651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.96912487" y3="-0.57203062" z3="3.26718186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62578298" y3="0.04668971" z3="2.20811597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5625366" y3="-2.48909005" z3="-0.06302294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40119096" y3="-3.62176227" z3="1.83278466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66349962" y3="-2.47465236" z3="4.12645997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.75722539" y3="-0.04052627" z3="4.19557169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.94416096" y3="1.08860745" z3="2.30136874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77419553" y3="0.5480626" z3="-4.2494092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76543883" y3="-0.41314846" z3="-4.40020493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4423382" y3="-1.60794134" z3="-5.0344351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.17010396" y3="-1.8485694" z3="-5.54536274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8147503" y3="-0.88586564" z3="-5.37091125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99729932" y3="1.47469178" z3="-3.71528201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7740417" y3="-0.2599993" z3="-4.01433916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46546063" y3="-2.65073078" z3="-5.15348129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.04033207" y3="-2.79049377" z3="-6.05442596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.82716836" y3="-1.0793119" z3="-5.73137224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.28924339" y3="-1.76038479" z3="5.03602977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33048906" y3="-3.63353556" z3="3.9911511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.27397141" y3="-3.5450614" z3="-5.95050834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44443737" y3="-2.5665304" z3="-4.4387272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.10291643" y3="1.11991437" z3="-1.52738869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.15170201" y3="1.52141982" z3="-2.51012559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.48227587" y3="1.3902801" z3="-1.74084038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.91105494" y3="2.00901227" z3="-2.88948191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.20113574" y3="1.08329919" z3="-0.97485057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.97548259" y3="2.20503016" z3="-3.04596528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.63077654" y3="2.14183092" z3="-3.69768481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.971942" y3="2.37801715" z3="-3.88226277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9163303" y3="2.42128548" z3="-4.47540427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.31735113" y3="2.84823904" z3="-4.80733414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.49168787" y3="3.1849764" z3="-3.4180247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3867687" y3="3.60632605" z3="-4.21554935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.33565317" y3="4.18866121" z3="-2.86390846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.12966439" y3="5.52032881" z3="-3.13542259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.15772881" y3="3.89511408" z3="-2.20917745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.79494368" y3="6.27015966" z3="-2.69789365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.20742341" y3="4.9902336" z3="-4.48918852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.0630396" y3="5.93003884" z3="-3.97013087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.36366659" y3="5.29418287" z3="-5.11645477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.91472322" y3="6.99172349" z3="-4.18614892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49050063" y3="-2.29176715" z3="-0.29457786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43638251" y3="-3.06503423" z3="-1.079506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01860435" y3="-2.70558575" z3="0.57956517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11883681" y3="-1.47582571" z3="-0.69930983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19582781" y3="-1.45661387" z3="-1.10613267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35703286" y3="-0.41507522" z3="-1.44073131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11786928" y3="-1.55657791" z3="-0.89076731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41207424" y3="-2.1039453" z3="-1.97051698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3401,.1004,-.1963;7.3931,.1524,.3987;6.6594,.4394,-.3608;4.7592,1.2608,-2.2888;4.397,.4972,-1.1907;2.7477,.8917,-3.6756;3.6792,1.7819,-3.1748;1.448,2.6464,-4.6773;1.5909,1.3087,-4.3984;.5769,2.9903,-5.2437;2.9071,-.4371,-3.4231;3.0961,.1487,-.9968;2.3829,-1.0098,-1.9665;.9134,-.8651,-1.79;3.0796,-2.3348,-1.7891;-.1446,-3.6466,.6911;.0356,-5.1553,-4.758;-.2025,-4.9273,-3.7155;-.8246,-4.3145,-1.0835;.8087,-4.5074,-2.853;-1.516,-5.0667,-3.2629;-1.8281,-4.7557,-1.9417;.5097,-4.2149,-1.5205;1.839,-4.3882,-3.1961;-2.3042,-5.3883,-3.9472;-2.8633,-4.8337,-1.6007;-1.0272,-3.8991,.2458;-2.1732,-3.7122,.8886;-3.0521,-4.1848,.4473;-2.1722,-3.5942,2.3571;-2.234,-3.443,5.1566;-3.3596,-3.8492,3.0584;-1.0157,-3.2675,3.0811;-1.0439,-3.1921,4.4706;-3.3893,-3.7764,4.4483;-4.2661,-4.1151,2.5077;-.0632,-3.0888,2.577;-.1227,-2.9548,5.0101;-4.32,-3.9874,4.9821;-2.2554,-3.3924,6.2487;1.4136,-3.84,-.6056;2.1662,-3.3105,-1.045;.5298,.3164,-4.7091;-3.1058,-1.7921,.049;-2.9586,-1.0592,1.2258;-1.9134,-.3946,1.584;-.466,.5266,1.2892;-.5942,1.4636,-.3134;.9267,-.6907,1.4132;-.4683,1.6776,2.7667;-3.9431,-1.0863,2.1125;-3.7434,-.488,3.3833;-.3051,.8112,-1.1549;.1195,2.3046,-.2829;-1.6028,1.8796,-.47;.9876,-1.0691,2.4467;1.8805,-.1944,1.1632;.8134,-1.5257,.7031;-.4937,1.1085,3.7129;.4491,2.2937,2.7697;-1.3327,2.3646,2.7497;-2.8768,-.9321,3.8983;-4.6605,-.6928,3.9513;-3.5969,.5998,3.2822;4.823,-.6293,.9967;4.4275,-1.9682,.886;3.7716,-2.601,1.9349;3.5266,-1.881,3.1003;3.9691,-.572,3.2672;4.6258,.0467,2.2081;4.5625,-2.4891,-.063;3.4012,-3.6218,1.8328;2.6635,-2.4747,4.1265;3.7572,-.0405,4.1956;4.9442,1.0886,2.3014;-.7742,.5481,-4.2494;-1.7654,-.4131,-4.4002;-1.4423,-1.6079,-5.0344;-.1701,-1.8486,-5.5454;.8148,-.8859,-5.3709;-.9973,1.4747,-3.7153;-2.774,-.26,-4.0143;-2.4655,-2.6507,-5.1535;.0403,-2.7905,-6.0544;1.8272,-1.0793,-5.7314;2.2892,-1.7604,5.036;2.3305,-3.6335,3.9912;-2.274,-3.5451,-5.9505;-3.4444,-2.5665,-4.4387;7.1029,1.1199,-1.5274;6.1517,1.5214,-2.5101;8.4823,1.3903,-1.7408;8.9111,2.009,-2.8895;9.2011,1.0833,-.9749;9.9755,2.205,-3.046;6.6308,2.1418,-3.6977;7.9719,2.378,-3.8823;5.9163,2.4213,-4.4754;8.3174,2.8482,-4.8073;3.4917,3.185,-3.418;2.3868,3.6063,-4.2155;4.3357,4.1887,-2.8639;4.1297,5.5203,-3.1354;5.1577,3.8951,-2.2092;4.7949,6.2702,-2.6979;2.2074,4.9902,-4.4892;3.063,5.93,-3.9701;1.3637,5.2942,-5.1165;2.9147,6.9917,-4.1861;-4.4905,-2.2918,-.2946;-4.4364,-3.065,-1.0795;-5.0186,-2.7056,.5796;-5.1188,-1.4758,-.6993;-2.1958,-1.4566,-1.1061;-2.357,-.4151,-1.4407;-1.1179,-1.5566,-.8908;-2.4121,-2.1039,-1.9705;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650250505927</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002425101789 0.000409487115 0.019588187728 0.005337129062</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029960986 -0.001262942 0.000148068 0.000169878 0.000211690 0.000303059 0.000327522 0.000367450 0.000516604 0.000566024 0.000733927 0.000778490 0.000808148 0.000890275 0.000935430 0.001087978 0.001107111 0.001128650 0.001242318 0.001315573 0.001350830 0.001613074 0.001650567 0.001857181 0.001958924 0.002203781 0.002241903 0.002379329 0.002627484 0.002875458 0.003143274 0.003295217 0.003763505 0.003883375 0.004111636 0.004940989 0.005285656 0.005489881 0.005753970 0.006264141 0.006482693 0.006879345 0.007235569 0.007717809 0.007961758 0.008478172 0.008931155 0.009576171 0.009835146 0.010937511 0.011619101 0.012214376 0.012841520 0.013268680 0.013831222 0.014438035 0.014799363 0.014901117 0.015212814 0.015445858 0.016095373 0.016660295 0.017497369 0.018070871 0.018649286 0.018757161 0.019634152 0.020810060 0.021050028 0.021860846 0.022645734 0.023050134 0.024232004 0.025857331 0.026346178 0.026852681 0.028281964 0.028783884 0.030695239 0.031431396 0.032110716 0.033382530 0.033751119 0.034943184 0.037282100 0.038052567 0.039156752 0.039211211 0.040786056 0.041218665 0.043370558 0.043865766 0.045345579 0.048337993 0.049071425 0.049461141 0.050137301 0.050984798 0.052119517 0.052332476 0.052391589 0.052600204 0.053521045 0.054027900 0.054263281 0.054731810 0.055158252 0.056031061 0.056364879 0.056471309 0.057138167 0.058434212 0.059466348 0.060474037 0.061092993 0.061400789 0.061947287 0.062323927 0.064477811 0.064911288 0.065719423 0.065856942 0.066785448 0.071761934 0.073782857 0.074783866 0.076903603 0.080437288 0.083632736 0.085014650 0.085597229 0.086299738 0.087340122 0.089717966 0.090713376 0.093459558 0.094503498 0.095562123 0.095823872 0.097245842 0.097390454 0.098213000 0.099162932 0.099306127 0.099911135 0.100754576 0.101485222 0.102362727 0.102995607 0.103735346 0.104451713 0.106222014 0.106620504 0.107025129 0.108885903 0.109686710 0.110394927 0.112244108 0.113130414 0.113805942 0.117008781 0.118602296 0.119323089 0.121158108 0.123411743 0.124943693 0.125868416 0.130503612 0.131561951 0.134799995 0.136672095 0.141807769 0.142396910 0.145260250 0.146038524 0.146687258 0.148177076 0.150599418 0.152832492 0.157502871 0.160138506 0.172099309 0.172906526 0.175679051 0.182705296 0.183230890 0.186186114 0.187630871 0.191010973 0.193102822 0.196535432 0.197823991 0.201899135 0.204760983 0.206752080 0.209296864 0.209612529 0.212268679 0.212601408 0.216417997 0.218046987 0.224184242 0.224937392 0.229690823 0.233718958 0.234317963 0.234935775 0.243599475 0.254276726 0.256524294 0.260096814 0.264848201 0.278336004 0.282228946 0.285997336 0.288066368 0.292282306 0.299077118 0.303993590 0.304923252 0.305556384 0.312795916 0.314582475 0.321523952 0.321870344 0.328905542 0.344254798 0.346796209 0.349919373 0.350650033 0.354309756 0.360789844 0.361497902 0.376676966 0.377459716 0.386483530 0.406883946 0.421752981 0.425735624 0.450457865 0.465185652 0.468620872 0.475590009 0.478686409 0.480287176 0.486971261 0.499711808 0.506955582 0.532388945 0.562072031 0.565652642 0.582636601 0.592149128 0.596050020 0.603101313 0.636996632 0.641151335 0.643951710 0.665296823 0.671759010 0.683718514 0.684808044 0.691230647 0.697523823 0.703816121 0.712877430 0.722515878 0.738654865 0.749932949 0.759275185 0.771845090 0.776657049 0.805071002 0.808941641 0.812593918 0.813258093 0.819853106 0.820661468 0.829050829 0.830477294 0.831514072 0.840964884 0.844718794 0.844914282 0.850433368 0.857502028 0.863291568 0.864614447 0.870399929 0.873844256 0.883300063 0.887401923 0.891569414 0.895553403 0.917779964 0.922110473 0.930417916 0.932245379 0.963776379 0.975199540 0.983620957 0.999115682 1.009290738 1.024038263 1.039416546 1.046864741 1.053219081 1.059460801 1.085275915 1.085970236 1.095154543 1.104743602 1.110475902 1.112125768 1.122702798 1.123574725 1.134994158 1.138964175 1.170222635 1.170587659 1.179004567 1.185474098 1.194055547 1.210376780 1.219891862 1.240050288 1.295300516 1.312052443 1.316381881 1.323868335 1.325325751 1.326468517 1.332908505 1.340343881 1.341697318 1.355367419 1.374673606 1.380312726 1.380923463 1.382809162 1.392914411 1.418373036 1.550982764 1.659892811 1.770140026</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">56</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33983156" y3="0.09770925" z3="-0.19598065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39224999" y3="0.15434112" z3="0.4005986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65832659" y3="0.44044864" z3="-0.35900153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75744946" y3="1.25995004" z3="-2.28690695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39635291" y3="0.4937501" z3="-1.19039921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74786906" y3="0.88860924" z3="-3.67572936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.67695199" y3="1.78018425" z3="-3.17265551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.44523147" y3="2.64190436" z3="-4.67568774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59099463" y3="1.30391222" z3="-4.39892969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.57399364" y3="2.98501839" z3="-5.24235604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.90972849" y3="-0.44021521" z3="-3.42470522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09612878" y3="0.14244133" z3="-0.99750769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.383806" y3="-1.01485062" z3="-1.96949583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91411966" y3="-0.86977327" z3="-1.79405768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0798092" y3="-2.34026426" z3="-1.79309011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14592128" y3="-3.64494982" z3="0.69077021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.02918075" y3="-5.15882827" z3="-4.75726417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.20775308" y3="-4.93011666" z3="-3.71465677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82736556" y3="-4.31432879" z3="-1.08271515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80455075" y3="-4.51087067" z3="-2.8530799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.52111505" y3="-5.06753185" z3="-3.26105467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.83193899" y3="-4.7551326" z3="-1.9398647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50687476" y3="-4.21694366" z3="-1.52068601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83475864" y3="-4.39313006" z3="-3.19705745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.31011707" y3="-5.38838691" z3="-3.94469274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.86701885" y3="-4.83131623" z3="-1.59817424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02889736" y3="-3.89680341" z3="0.24605924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17470701" y3="-3.7072554" z3="0.88893587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05401167" y3="-4.17985676" z3="0.44886111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17269201" y3="-3.58878081" z3="2.35763064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23278966" y3="-3.4365417" z3="5.15731182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.360478" y3="-3.84069056" z3="3.05955746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01499054" y3="-3.2649461" z3="3.08124926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04236031" y3="-3.18900594" z3="4.47076803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38936495" y3="-3.76729905" z3="4.44953989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26798118" y3="-4.10451374" z3="2.50934143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06203428" y3="-3.08927871" z3="2.57682322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12014007" y3="-2.95404773" z3="5.00988871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32032655" y3="-3.97593832" z3="4.98379802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2536242" y3="-3.38548233" z3="6.24952117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4119814" y3="-3.84235575" z3="-0.60681913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16504498" y3="-3.31474341" z3="-1.04728651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53184794" y3="0.30977102" z3="-4.71270985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.1046671" y3="-1.78845702" z3="0.04875568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9555502" y3="-1.05387426" z3="1.22456337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.90877605" y3="-0.39090723" z3="1.5813195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.46048836" y3="0.52750531" z3="1.28516122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.5873366" y3="1.46265209" z3="-0.3184437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.93003528" y3="-0.69218903" z3="1.41060439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.45915594" y3="1.6809886" z3="2.76113785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.93949283" y3="-1.07792027" z3="2.11195298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.7369405" y3="-0.4793486" z3="3.38258478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.30364063" y3="0.80643229" z3="-1.15969815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.13911808" y3="2.29858235" z3="-0.29040589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.59484168" y3="1.89141075" z3="-0.47380297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.98963022" y3="-1.07037704" z3="2.44440581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.88527266" y3="-0.19827025" z3="1.16097846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81540137" y3="-1.52748795" z3="0.70109929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.48658799" y3="1.11326121" z3="3.70818765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.46109527" y3="2.29360864" z3="2.76316945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.32118286" y3="2.37178592" z3="2.74337203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.87054907" y3="-0.9252776" z3="3.89685218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.65399604" y3="-0.68189562" z3="3.95172586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.58829404" y3="0.60817431" z3="3.28097844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8237248" y3="-0.6343564" z3="0.99595788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42676009" y3="-1.97254221" z3="0.88265815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77089507" y3="-2.60689211" z3="1.93062707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5277626" y3="-1.88917838" z3="3.09790634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97230214" y3="-0.58120878" z3="3.26752222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62862104" y3="0.03914393" z3="2.20917166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.56034977" y3="-2.49162735" z3="-0.0676279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39902624" y3="-3.62694829" z3="1.82646047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66470116" y3="-2.48401324" z3="4.12345888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.76203687" y3="-0.05158715" z3="4.19741901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.94823077" y3="1.08051734" z3="2.30444107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77274041" y3="0.54180338" z3="-4.26007968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76340025" y3="-0.41970682" z3="-4.4130425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43949051" y3="-1.61440295" z3="-5.04389373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.16673298" y3="-1.85625119" z3="-5.55043604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.81791563" y3="-0.89271207" z3="-5.37185503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99782055" y3="1.46819804" z3="-3.72468306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77180537" y3="-0.265791" z3="-4.02862057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46126106" y3="-2.65601708" z3="-5.15839338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.04353048" y3="-2.7985305" z3="-6.05121534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83057602" y3="-1.08701431" z3="-5.72763625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.29555565" y3="-1.7720768" z3="5.03771893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32666138" y3="-3.64137408" z3="3.98311862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.26588282" y3="-3.55489416" z3="-5.94582833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44375409" y3="-2.56819712" z3="-4.44964463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.10095813" y3="1.12405824" z3="-1.52417593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.14941291" y3="1.52463816" z3="-2.50693383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.47971099" y3="1.39875352" z3="-1.73604575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.90761531" y3="2.02092935" z3="-2.88317221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.19881183" y3="1.09244388" z3="-0.97002289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.97160058" y3="2.22039411" z3="-3.03839723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.62760823" y3="2.1486153" z3="-3.69299365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9682416" y3="2.38908422" z3="-3.87602878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91294007" y3="2.4275276" z3="-4.47071393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.31303571" y3="2.86211891" z3="-4.79990829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.48623198" y3="3.18321365" z3="-3.41316871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.38102991" y3="3.60341051" z3="-4.21090854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.32705187" y3="4.18784653" z3="-2.85583607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.1178664" y3="5.51967154" z3="-3.12440184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.14908895" y3="3.89489412" z3="-2.20081736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.78076837" y3="6.27022536" z3="-2.68441592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.19837404" y3="4.98763512" z3="-4.48147409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.05100672" y3="5.92854134" z3="-3.95926192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.35448536" y3="5.29102134" z3="-5.10883096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.90014945" y3="6.99043457" z3="-4.17289826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49071517" y3="-2.28574705" z3="-0.29307561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43869953" y3="-3.0601375" z3="-1.0770979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01889814" y3="-2.69724684" z3="0.58224914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11762688" y3="-1.46892304" z3="-0.69832337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19539869" y3="-1.45487773" z3="-1.10750572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35772209" y3="-0.41548401" z3="-1.44567713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11975921" y3="-1.55053733" z3="-0.8902214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40677506" y3="-2.10443602" z3="-1.9680733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0977,-.196;7.3922,.1543,.4006;6.6583,.4404,-.359;4.7574,1.26,-2.2869;4.3964,.4938,-1.1904;2.7479,.8886,-3.6757;3.677,1.7802,-3.1727;1.4452,2.6419,-4.6757;1.591,1.3039,-4.3989;.574,2.985,-5.2424;2.9097,-.4402,-3.4247;3.0961,.1424,-.9975;2.3838,-1.0149,-1.9695;.9141,-.8698,-1.7941;3.0798,-2.3403,-1.7931;-.1459,-3.6449,.6908;.0292,-5.1588,-4.7573;-.2078,-4.9301,-3.7147;-.8274,-4.3143,-1.0827;.8046,-4.5109,-2.8531;-1.5211,-5.0675,-3.2611;-1.8319,-4.7551,-1.9399;.5069,-4.2169,-1.5207;1.8348,-4.3931,-3.1971;-2.3101,-5.3884,-3.9447;-2.867,-4.8313,-1.5982;-1.0289,-3.8968,.2461;-2.1747,-3.7073,.8889;-3.054,-4.1799,.4489;-2.1727,-3.5888,2.3576;-2.2328,-3.4365,5.1573;-3.3605,-3.8407,3.0596;-1.015,-3.2649,3.0812;-1.0424,-3.189,4.4708;-3.3894,-3.7673,4.4495;-4.268,-4.1045,2.5093;-.062,-3.0893,2.5768;-.1201,-2.954,5.0099;-4.3203,-3.9759,4.9838;-2.2536,-3.3855,6.2495;1.412,-3.8424,-.6068;2.165,-3.3147,-1.0473;.5318,.3098,-4.7127;-3.1047,-1.7885,.0488;-2.9556,-1.0539,1.2246;-1.9088,-.3909,1.5813;-.4605,.5275,1.2852;-.5873,1.4627,-.3184;.93,-.6922,1.4106;-.4592,1.681,2.7611;-3.9395,-1.0779,2.112;-3.7369,-.4793,3.3826;-.3036,.8064,-1.1597;.1391,2.2986,-.2904;-1.5948,1.8914,-.4738;.9896,-1.0704,2.4444;1.8853,-.1983,1.161;.8154,-1.5275,.7011;-.4866,1.1133,3.7082;.4611,2.2936,2.7632;-1.3212,2.3718,2.7434;-2.8705,-.9253,3.8969;-4.654,-.6819,3.9517;-3.5883,.6082,3.281;4.8237,-.6344,.996;4.4268,-1.9725,.8827;3.7709,-2.6069,1.9306;3.5278,-1.8892,3.0979;3.9723,-.5812,3.2675;4.6286,.0391,2.2092;4.5603,-2.4916,-.0676;3.399,-3.6269,1.8265;2.6647,-2.484,4.1235;3.762,-.0516,4.1974;4.9482,1.0805,2.3044;-.7727,.5418,-4.2601;-1.7634,-.4197,-4.413;-1.4395,-1.6144,-5.0439;-.1667,-1.8563,-5.5504;.8179,-.8927,-5.3719;-.9978,1.4682,-3.7247;-2.7718,-.2658,-4.0286;-2.4613,-2.656,-5.1584;.0435,-2.7985,-6.0512;1.8306,-1.087,-5.7276;2.2956,-1.7721,5.0377;2.3267,-3.6414,3.9831;-2.2659,-3.5549,-5.9458;-3.4438,-2.5682,-4.4496;7.101,1.1241,-1.5242;6.1494,1.5246,-2.5069;8.4797,1.3988,-1.736;8.9076,2.0209,-2.8832;9.1988,1.0924,-.97;9.9716,2.2204,-3.0384;6.6276,2.1486,-3.693;7.9682,2.3891,-3.876;5.9129,2.4275,-4.4707;8.313,2.8621,-4.7999;3.4862,3.1832,-3.4132;2.381,3.6034,-4.2109;4.3271,4.1878,-2.8558;4.1179,5.5197,-3.1244;5.1491,3.8949,-2.2008;4.7808,6.2702,-2.6844;2.1984,4.9876,-4.4815;3.051,5.9285,-3.9593;1.3545,5.291,-5.1088;2.9001,6.9904,-4.1729;-4.4907,-2.2857,-.2931;-4.4387,-3.0601,-1.0771;-5.0189,-2.6972,.5822;-5.1176,-1.4689,-.6983;-2.1954,-1.4549,-1.1075;-2.3577,-.4155,-1.4457;-1.1198,-1.5505,-.8902;-2.4068,-2.1044,-1.9681;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650270568549</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003479694478 0.000502518425 0.016749977248 0.005339168397</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029966887 -0.001401776 0.000150602 0.000170586 0.000211821 0.000303182 0.000327560 0.000369504 0.000518043 0.000567221 0.000734050 0.000778504 0.000808167 0.000890358 0.000935691 0.001089120 0.001107238 0.001130415 0.001243738 0.001321090 0.001353451 0.001613655 0.001650810 0.001857282 0.001958492 0.002204905 0.002245005 0.002412724 0.002654648 0.002876032 0.003205729 0.003296718 0.003769482 0.003883840 0.004114633 0.005012990 0.005286751 0.005492036 0.005756425 0.006277603 0.006482556 0.006976071 0.007234994 0.007783773 0.007967942 0.008524582 0.008966392 0.009604243 0.009842891 0.010938317 0.011618855 0.012228688 0.012841489 0.013269018 0.013830654 0.014476398 0.014893764 0.014948960 0.015217190 0.015448272 0.016097858 0.016662660 0.017497434 0.018074547 0.018647978 0.018773541 0.019649695 0.020810424 0.021085990 0.021887442 0.022651556 0.023096824 0.024245844 0.025857708 0.026347272 0.026858579 0.028282039 0.028783930 0.030700051 0.031431126 0.032116634 0.033383566 0.033750824 0.034960106 0.037294281 0.038054010 0.039160416 0.039211811 0.040787211 0.041429591 0.043410174 0.043894819 0.045353588 0.048340773 0.049071366 0.049463164 0.050149302 0.050984816 0.052119609 0.052332479 0.052391565 0.052601235 0.053531577 0.054031949 0.054278905 0.054732010 0.055158377 0.056034846 0.056364869 0.056471345 0.057138158 0.058434238 0.059469549 0.060511646 0.061116609 0.061441849 0.061954662 0.062324729 0.064604127 0.064917597 0.065721049 0.065857331 0.066823945 0.071777207 0.073783370 0.074790735 0.076904424 0.080456494 0.083632807 0.085014812 0.085612890 0.086307765 0.087350418 0.089719134 0.090728256 0.093459409 0.094504626 0.095562728 0.095823988 0.097257863 0.097394347 0.098213626 0.099182130 0.099338112 0.099911681 0.100764868 0.101490218 0.102362919 0.102997339 0.103735126 0.104465348 0.106268998 0.106672706 0.107025976 0.108889120 0.109687008 0.110404180 0.112247108 0.113133777 0.113804135 0.117015592 0.118605809 0.119336365 0.121160358 0.123412125 0.124943558 0.125869498 0.130503422 0.131564276 0.134800000 0.136672951 0.141807485 0.142396889 0.145260517 0.146039733 0.146690670 0.148208289 0.150692051 0.152856879 0.157694970 0.160159975 0.172100895 0.172915503 0.175679863 0.182705535 0.183271746 0.186187209 0.187719739 0.191010871 0.193105259 0.196535936 0.197823923 0.201905722 0.204761363 0.206752105 0.209388008 0.209612559 0.212311299 0.212618049 0.216428550 0.218047113 0.224189169 0.224939120 0.229695333 0.233719654 0.234319303 0.234936577 0.243600889 0.254289289 0.256524504 0.260107097 0.264870887 0.278337271 0.282229258 0.285998201 0.288075024 0.292281962 0.299077067 0.303993553 0.304955980 0.305668037 0.312796649 0.314586174 0.321528852 0.321869970 0.328905495 0.344288997 0.346796269 0.349919380 0.350649989 0.354309750 0.360791676 0.361498548 0.376934040 0.377460021 0.386539589 0.406933481 0.421754900 0.425819198 0.450457893 0.465211614 0.468621215 0.475590007 0.478699915 0.480350976 0.487003316 0.500059282 0.507174313 0.532447784 0.562072689 0.565662784 0.582923814 0.592149823 0.596368105 0.603118156 0.637003620 0.641180886 0.643951735 0.665360077 0.671799730 0.683718887 0.684968294 0.691230650 0.697590896 0.703816177 0.712908834 0.722588957 0.738656247 0.749933035 0.759275513 0.771845105 0.776657174 0.805159921 0.808956114 0.812599553 0.813264680 0.819853747 0.820689956 0.829059690 0.830477415 0.831522886 0.840999889 0.844776601 0.844917900 0.850553782 0.857508550 0.863372954 0.864614496 0.870399935 0.873847580 0.883303602 0.887404361 0.891584298 0.895553696 0.917829686 0.922110747 0.930421248 0.932246673 0.963776400 0.975200370 0.983621042 0.999115715 1.009290847 1.024038413 1.039417335 1.046872797 1.053225654 1.059471626 1.085279726 1.085976700 1.095332933 1.104743610 1.110585856 1.112134750 1.122706793 1.123577957 1.134994285 1.138965246 1.170258533 1.170594545 1.179009667 1.185475085 1.194055935 1.210575803 1.219894825 1.240218799 1.295316699 1.312251436 1.317070066 1.323876433 1.325355340 1.326468873 1.332911037 1.340344993 1.341697372 1.355367755 1.374673597 1.380317898 1.380923925 1.383014694 1.392964810 1.418374010 1.550982968 1.659892940 1.770640378</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">57</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.339777" y3="0.09442097" z3="-0.19567358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39160138" y3="0.15570541" z3="0.40245697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65745308" y3="0.44096669" z3="-0.35725341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75569468" y3="1.25853746" z3="-2.28514831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39588036" y3="0.48963322" z3="-1.19012081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74724844" y3="0.88554483" z3="-3.67539362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.67441335" y3="1.77798859" z3="-3.17048129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.44188078" y3="2.63794081" z3="-4.67320855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58974587" y3="1.30001141" z3="-4.39830719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.57022384" y3="2.98026655" z3="-5.23969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91161345" y3="-0.4434003" z3="-3.42622149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09634995" y3="0.13549072" z3="-0.99814191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38478608" y3="-1.02044734" z3="-1.97233815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91500696" y3="-0.87551147" z3="-1.79771409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08028424" y3="-2.34627453" z3="-1.79715248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14658291" y3="-3.64408002" z3="0.69137179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.02257908" y3="-5.16374712" z3="-4.75557026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.21326197" y3="-4.93331998" z3="-3.71307279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83010671" y3="-4.3137735" z3="-1.08140197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.8002308" y3="-4.514646" z3="-2.85273389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.52657355" y3="-5.0683366" z3="-3.25835666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.83601562" y3="-4.75400124" z3="-1.93735768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50389612" y3="-4.21881166" z3="-1.52042015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83046499" y3="-4.39894266" z3="-3.1975192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.31619296" y3="-5.38960352" z3="-3.9408363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.87079352" y3="-4.82889054" z3="-1.59469328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03014154" y3="-3.89503914" z3="0.24724619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17515532" y3="-3.70359767" z3="0.89060895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05574436" y3="-4.17445693" z3="0.45075195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1727632" y3="-3.58350808" z3="2.35890572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23182637" y3="-3.4288317" z3="5.15828219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36102912" y3="-3.83185232" z3="3.06131962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01425147" y3="-3.26170991" z3="3.0817894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04101498" y3="-3.18469288" z3="4.47119597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38937514" y3="-3.75726237" z3="4.45118453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26925178" y3="-4.09386392" z3="2.51159895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06120856" y3="-3.08871967" z3="2.57671315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11816778" y3="-2.95151744" z3="5.00979852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32073863" y3="-3.96306998" z3="4.985887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25218262" y3="-3.37700028" z3="6.25043454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41043421" y3="-3.84478332" z3="-0.60765454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.164102" y3="-3.31922466" z3="-1.04935056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53216446" y3="0.30542088" z3="-4.71326231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10293765" y3="-1.78294004" z3="0.04858708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95156668" y3="-1.04764554" z3="1.22346204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.90379962" y3="-0.38554067" z3="1.57857264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.45321416" y3="0.52934743" z3="1.28108825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.57799949" y3="1.4629882" z3="-0.32366589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9342243" y3="-0.69344106" z3="1.408526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.44997309" y3="1.68479708" z3="2.75528376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.93477538" y3="-1.06950329" z3="2.11177838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.73065998" y3="-0.46962932" z3="3.38116661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.29558503" y3="0.80603051" z3="-1.16412839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.14545568" y3="2.2979795" z3="-0.29654649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.58397029" y3="1.88936598" z3="-0.47982364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9925275" y3="-1.07058112" z3="2.44270416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.89027751" y3="-0.20164687" z3="1.15865885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81814249" y3="-1.52907087" z3="0.69971305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.47833864" y3="1.1188435" z3="3.70330502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.47031611" y3="2.29630855" z3="2.75648134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.31095413" y3="2.37599024" z3="2.73606248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.86479172" y3="-0.9158132" z3="3.89552912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.6475451" y3="-0.67020451" z3="3.95116819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.58049549" y3="0.61744062" z3="3.2779213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82466493" y3="-0.63996563" z3="0.99523184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42597071" y3="-1.97742085" z3="0.87948121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77034719" y3="-2.61325051" z3="1.92672224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52898983" y3="-1.89768995" z3="3.09561132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97535494" y3="-0.59071491" z3="3.26757537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.63168885" y3="0.03105503" z3="2.21010597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55784862" y3="-2.49463344" z3="-0.07207099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39693586" y3="-3.63254207" z3="1.82056935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66585209" y3="-2.49337522" z3="4.12052749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.76648201" y3="-0.06279993" z3="4.19867138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.95272296" y3="1.07179254" z3="2.30737938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77403485" y3="0.53560124" z3="-4.26100383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76351722" y3="-0.42665094" z3="-4.41625671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43667314" y3="-1.62112295" z3="-5.04853522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.16191619" y3="-1.86067842" z3="-5.55276757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82106767" y3="-0.89661308" z3="-5.37408155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00087244" y3="1.46175127" z3="-3.72714892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77376587" y3="-0.274237" z3="-4.03524506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4578883" y3="-2.66493527" z3="-5.17073066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.05312693" y3="-2.80272018" z3="-6.06368997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83516471" y3="-1.08899787" z3="-5.72994365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.29176967" y3="-1.78142689" z3="5.03091171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33254294" y3="-3.65110993" z3="3.98352905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.25714631" y3="-3.56345042" z3="-5.96257831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44382776" y3="-2.57840785" z3="-4.46400762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0990598" y3="1.12767945" z3="-1.52098173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.14711196" y3="1.52729864" z3="-2.50375706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.47716852" y3="1.40672114" z3="-1.73128181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.90412756" y3="2.03228713" z3="-2.87688961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.19658064" y3="1.10110851" z3="-0.96526616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.96762457" y3="2.23518975" z3="-3.03087973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.62440992" y3="2.15482696" z3="-3.688275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.96445331" y3="2.39955651" z3="-3.86979216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90951361" y3="2.43317937" z3="-4.4659896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.30856349" y3="2.87538533" z3="-4.79247054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.48082017" y3="3.18105863" z3="-3.40835935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.37535144" y3="3.60036341" z3="-4.20616594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.31858988" y3="4.18651302" z3="-2.84799891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.10609275" y3="5.51843881" z3="-3.11351827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.14076078" y3="3.89420567" z3="-2.19282493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.76643689" y3="6.26971807" z3="-2.67091608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.18946003" y3="4.98465622" z3="-4.47385042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.03901627" y3="5.92654826" z3="-3.94847359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.34534801" y3="5.28726058" z3="-5.10129883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.88538654" y3="6.98859398" z3="-4.15951876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48987311" y3="-2.27880583" z3="-0.29149029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43965029" y3="-3.05464825" z3="-1.07412488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01815473" y3="-2.68817108" z3="0.58471671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11593658" y3="-1.4618964" z3="-0.69775316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19374634" y3="-1.45286004" z3="-1.10862644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35249506" y3="-0.41151579" z3="-1.44595836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11585026" y3="-1.55511599" z3="-0.89411466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41218443" y3="-2.10245221" z3="-1.97075073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0944,-.1957;7.3916,.1557,.4025;6.6575,.441,-.3573;4.7557,1.2585,-2.2851;4.3959,.4896,-1.1901;2.7472,.8855,-3.6754;3.6744,1.778,-3.1705;1.4419,2.6379,-4.6732;1.5897,1.3,-4.3983;.5702,2.9803,-5.2397;2.9116,-.4434,-3.4262;3.0963,.1355,-.9981;2.3848,-1.0204,-1.9723;.915,-.8755,-1.7977;3.0803,-2.3463,-1.7972;-.1466,-3.6441,.6914;.0226,-5.1637,-4.7556;-.2133,-4.9333,-3.7131;-.8301,-4.3138,-1.0814;.8002,-4.5146,-2.8527;-1.5266,-5.0683,-3.2584;-1.836,-4.754,-1.9374;.5039,-4.2188,-1.5204;1.8305,-4.3989,-3.1975;-2.3162,-5.3896,-3.9408;-2.8708,-4.8289,-1.5947;-1.0301,-3.895,.2472;-2.1752,-3.7036,.8906;-3.0557,-4.1745,.4508;-2.1728,-3.5835,2.3589;-2.2318,-3.4288,5.1583;-3.361,-3.8319,3.0613;-1.0143,-3.2617,3.0818;-1.041,-3.1847,4.4712;-3.3894,-3.7573,4.4512;-4.2693,-4.0939,2.5116;-.0612,-3.0887,2.5767;-.1182,-2.9515,5.0098;-4.3207,-3.9631,4.9859;-2.2522,-3.377,6.2504;1.4104,-3.8448,-.6077;2.1641,-3.3192,-1.0494;.5322,.3054,-4.7133;-3.1029,-1.7829,.0486;-2.9516,-1.0476,1.2235;-1.9038,-.3855,1.5786;-.4532,.5293,1.2811;-.578,1.463,-.3237;.9342,-.6934,1.4085;-.45,1.6848,2.7553;-3.9348,-1.0695,2.1118;-3.7307,-.4696,3.3812;-.2956,.806,-1.1641;.1455,2.298,-.2965;-1.584,1.8894,-.4798;.9925,-1.0706,2.4427;1.8903,-.2016,1.1587;.8181,-1.5291,.6997;-.4783,1.1188,3.7033;.4703,2.2963,2.7565;-1.311,2.376,2.7361;-2.8648,-.9158,3.8955;-4.6475,-.6702,3.9512;-3.5805,.6174,3.2779;4.8247,-.64,.9952;4.426,-1.9774,.8795;3.7703,-2.6133,1.9267;3.529,-1.8977,3.0956;3.9754,-.5907,3.2676;4.6317,.0311,2.2101;4.5578,-2.4946,-.0721;3.3969,-3.6325,1.8206;2.6659,-2.4934,4.1205;3.7665,-.0628,4.1987;4.9527,1.0718,2.3074;-.774,.5356,-4.261;-1.7635,-.4267,-4.4163;-1.4367,-1.6211,-5.0485;-.1619,-1.8607,-5.5528;.8211,-.8966,-5.3741;-1.0009,1.4618,-3.7271;-2.7738,-.2742,-4.0352;-2.4579,-2.6649,-5.1707;.0531,-2.8027,-6.0637;1.8352,-1.089,-5.7299;2.2918,-1.7814,5.0309;2.3325,-3.6511,3.9835;-2.2571,-3.5635,-5.9626;-3.4438,-2.5784,-4.464;7.0991,1.1277,-1.521;6.1471,1.5273,-2.5038;8.4772,1.4067,-1.7313;8.9041,2.0323,-2.8769;9.1966,1.1011,-.9653;9.9676,2.2352,-3.0309;6.6244,2.1548,-3.6883;7.9645,2.3996,-3.8698;5.9095,2.4332,-4.466;8.3086,2.8754,-4.7925;3.4808,3.1811,-3.4084;2.3754,3.6004,-4.2062;4.3186,4.1865,-2.848;4.1061,5.5184,-3.1135;5.1408,3.8942,-2.1928;4.7664,6.2697,-2.6709;2.1895,4.9847,-4.4739;3.039,5.9265,-3.9485;1.3453,5.2873,-5.1013;2.8854,6.9886,-4.1595;-4.4899,-2.2788,-.2915;-4.4397,-3.0546,-1.0741;-5.0182,-2.6882,.5847;-5.1159,-1.4619,-.6978;-2.1937,-1.4529,-1.1086;-2.3525,-.4115,-1.446;-1.1159,-1.5551,-.8941;-2.4122,-2.1025,-1.9708;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650286014798</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004227081518 0.000616429615 0.018658404169 0.005336824994</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029968246 -0.001806620 0.000151175 0.000171872 0.000211800 0.000305051 0.000327677 0.000372806 0.000519222 0.000568567 0.000735575 0.000781446 0.000811746 0.000893188 0.000935711 0.001089268 0.001107419 0.001133857 0.001243748 0.001323281 0.001356051 0.001616805 0.001653995 0.001858377 0.001959363 0.002204968 0.002262178 0.002531002 0.002731879 0.002880737 0.003246617 0.003296957 0.003772396 0.003887118 0.004119031 0.005057864 0.005287254 0.005492545 0.005755990 0.006286862 0.006482629 0.007031451 0.007236759 0.007822576 0.007971042 0.008530865 0.009002008 0.009642036 0.009859557 0.010941684 0.011619753 0.012245601 0.012841603 0.013269818 0.013831437 0.014499088 0.014897541 0.015049837 0.015233101 0.015451460 0.016102542 0.016667369 0.017520111 0.018074958 0.018651516 0.018773037 0.019652418 0.020811627 0.021130488 0.021889173 0.022659279 0.023130691 0.024249662 0.025858158 0.026348157 0.026859743 0.028282980 0.028783921 0.030702348 0.031431889 0.032116461 0.033383619 0.033751177 0.034969247 0.037300024 0.038055787 0.039163438 0.039211854 0.040788590 0.041744016 0.043462182 0.043924334 0.045361862 0.048342183 0.049071519 0.049464312 0.050152282 0.050984939 0.052119690 0.052332479 0.052391552 0.052602677 0.053537299 0.054035325 0.054308927 0.054733087 0.055158370 0.056037291 0.056364868 0.056471310 0.057138082 0.058434215 0.059474677 0.060554634 0.061136580 0.061517723 0.061959661 0.062325738 0.064780781 0.064948997 0.065724179 0.065860007 0.066884484 0.071794138 0.073783614 0.074797321 0.076905126 0.080475796 0.083632796 0.085015783 0.085625267 0.086316816 0.087359184 0.089719150 0.090744567 0.093461109 0.094505254 0.095562975 0.095824200 0.097258090 0.097395754 0.098213652 0.099187079 0.099355422 0.099912490 0.100768372 0.101492277 0.102363257 0.102998637 0.103734957 0.104470982 0.106281318 0.106715737 0.107039248 0.108892467 0.109686996 0.110435077 0.112247273 0.113146913 0.113831871 0.117053345 0.118610763 0.119362129 0.121162719 0.123411995 0.124944770 0.125877608 0.130503686 0.131565080 0.134800016 0.136887114 0.141811404 0.142396838 0.145262959 0.146040022 0.146692739 0.148212608 0.150750600 0.152869827 0.157784193 0.160182119 0.172101125 0.172921739 0.175680423 0.182706329 0.183298126 0.186187916 0.187764769 0.191011319 0.193108538 0.196536985 0.197823836 0.201905703 0.204761457 0.206752103 0.209493087 0.209612616 0.212382991 0.212637815 0.216437409 0.218048802 0.224193837 0.224940625 0.229706723 0.233719775 0.234322838 0.234938193 0.243600779 0.254300916 0.256524558 0.260110274 0.264905219 0.278337764 0.282229456 0.285998303 0.288090033 0.292286961 0.299081940 0.303993658 0.304972249 0.305738027 0.312802002 0.314594425 0.321532921 0.321874785 0.328910371 0.344309940 0.346796658 0.349920935 0.350653039 0.354310147 0.360793103 0.361498503 0.377011811 0.377468803 0.386666163 0.406994404 0.421755020 0.425871732 0.450457934 0.465288469 0.468622418 0.475590285 0.478701476 0.480422473 0.487037657 0.500419856 0.507552800 0.532587916 0.562104602 0.565665011 0.583257709 0.592151132 0.596503908 0.603147472 0.637011819 0.641203432 0.643952030 0.665366204 0.671871143 0.683719151 0.685009923 0.691230680 0.697651906 0.703816193 0.712935339 0.722719616 0.738657047 0.749933188 0.759275558 0.771845248 0.776657368 0.805180096 0.808961258 0.812609556 0.813264758 0.819859081 0.820709188 0.829059586 0.830477541 0.831528795 0.841015094 0.844791453 0.844920815 0.850581223 0.857511599 0.863422870 0.864614760 0.870403235 0.873859129 0.883308962 0.887406419 0.891593032 0.895555075 0.917861884 0.922110779 0.930424967 0.932247796 0.963776425 0.975200565 0.983625133 0.999115701 1.009314019 1.024042936 1.039432206 1.046914359 1.053261968 1.059515392 1.085285746 1.085987150 1.095568158 1.104743817 1.110683135 1.112142753 1.122709197 1.123579779 1.134994438 1.138966581 1.170276777 1.170597619 1.179011896 1.185475670 1.194056530 1.210746312 1.219899256 1.240975804 1.295353947 1.312375611 1.317833978 1.323893218 1.325430736 1.326477741 1.332915004 1.340360993 1.341698013 1.355368335 1.374673534 1.380336527 1.380925140 1.383855867 1.393279375 1.418376149 1.550983824 1.659894558 1.771192550</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">58</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33956449" y3="0.09169481" z3="-0.1953044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39085394" y3="0.15735006" z3="0.40425665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65647559" y3="0.44182647" z3="-0.35553386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75386282" y3="1.25759505" z3="-2.28330362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39525054" y3="0.48602297" z3="-1.18977227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74716557" y3="0.88244363" z3="-3.67571607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.67186962" y3="1.77618605" z3="-3.16825887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.43861583" y3="2.63395968" z3="-4.67118099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58957819" y3="1.29543281" z3="-4.3992453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.56670906" y3="2.97535547" z3="-5.23786917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91372777" y3="-0.44647952" z3="-3.42801197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09636134" y3="0.12903667" z3="-0.99882897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38576793" y3="-1.02563801" z3="-1.97535953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91584869" y3="-0.88074092" z3="-1.80159037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08084391" y3="-2.35178527" z3="-1.80130005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14695711" y3="-3.64313299" z3="0.69164849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01644618" y3="-5.16749835" z3="-4.75450957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.21813189" y3="-4.93635768" z3="-3.71191743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83211855" y3="-4.31385137" z3="-1.08016287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79655623" y3="-4.51837594" z3="-2.85258648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.53121068" y3="-5.06929917" z3="-3.25610298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.83914284" y3="-4.75359954" z3="-1.9350386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50168749" y3="-4.22106916" z3="-1.52030478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82655793" y3="-4.40404109" z3="-3.1982585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.32213573" y3="-5.38938967" z3="-3.93802424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.87391671" y3="-4.82650572" z3="-1.5915717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03100501" y3="-3.8931932" z3="0.24805286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17579447" y3="-3.69914871" z3="0.8914344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0567013" y3="-4.16983385" z3="0.45271745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17266627" y3="-3.57819923" z3="2.35990164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23083373" y3="-3.42122175" z3="5.15924977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3611214" y3="-3.82388095" z3="3.06282744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01329248" y3="-3.25836311" z3="3.08236932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03966813" y3="-3.18009862" z3="4.4717351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38907311" y3="-3.74807783" z3="4.45264356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26987441" y3="-4.08482332" z3="2.51359129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0597175" y3="-3.08830274" z3="2.57722431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11609168" y3="-2.94864305" z3="5.00998675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32062398" y3="-3.95180674" z3="4.98770831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25094069" y3="-3.36846216" z3="6.25135449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40945213" y3="-3.84729844" z3="-0.60863403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1634898" y3="-3.3236206" z3="-1.05148476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53393921" y3="0.29910383" z3="-4.7173479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.10091323" y3="-1.77896274" z3="0.04832804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94816167" y3="-1.04204912" z3="1.22211778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.89948422" y3="-0.38074126" z3="1.5757323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.4471374" y3="0.53105777" z3="1.27734845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.57004326" y3="1.4622583" z3="-0.32874726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.93792563" y3="-0.69436567" z3="1.40705981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.44212968" y3="1.68864905" z3="2.74988247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.93086851" y3="-1.0616057" z3="2.11094136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.72511401" y3="-0.46067507" z3="3.37974956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.29181463" y3="0.80236742" z3="-1.16891173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.15925875" y3="2.29401923" z3="-0.30421965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.57484194" y3="1.89458588" z3="-0.48342616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99503977" y3="-1.07079208" z3="2.44167316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.89536818" y3="-0.20508743" z3="1.15706334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82026567" y3="-1.53062782" z3="0.69911862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.47158357" y3="1.1240846" z3="3.69872336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.4798936" y3="2.29827515" z3="2.75015162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.30180909" y3="2.38201311" z3="2.7297198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.85935517" y3="-0.9076965" z3="3.89391912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.6418916" y3="-0.65948335" z3="3.95053861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.57361618" y3="0.62611514" z3="3.27529718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82547196" y3="-0.64497528" z3="0.99456353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42528976" y3="-1.98176844" z3="0.87619765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76933512" y3="-2.61902467" z3="1.92225907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53000059" y3="-1.90588079" z3="3.09314734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97873699" y3="-0.60003548" z3="3.26808566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6346288" y3="0.0234231" z3="2.21126497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55601388" y3="-2.4971758" z3="-0.07644496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39435215" y3="-3.63750905" z3="1.81396262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66665993" y3="-2.502904" z3="4.117203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.77156001" y3="-0.07410323" z3="4.20076184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.9568524" y3="1.06359908" z3="2.31055338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7731355" y3="0.52843243" z3="-4.26728061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76185076" y3="-0.43414757" z3="-4.42570397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43336439" y3="-1.62821023" z3="-5.05749702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15760868" y3="-1.86757921" z3="-5.55914126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82477371" y3="-0.90270872" z3="-5.37660888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00158693" y3="1.45408257" z3="-3.73225946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7725442" y3="-0.28204016" z3="-4.04547169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45486375" y3="-2.6700504" z3="-5.18040033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.05542617" y3="-2.80943004" z3="-6.05850001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83926717" y3="-1.09512673" z3="-5.72941963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30706106" y3="-1.79511532" z3="5.04060466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31895343" y3="-3.65765255" z3="3.96687612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.25399387" y3="-3.57266601" z3="-5.96187901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44324971" y3="-2.57642683" z3="-4.48266603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.09707578" y3="1.1314552" z3="-1.51789796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.14472515" y3="1.5302264" z3="-2.50062166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.47457273" y3="1.41458536" z3="-1.72675698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.90060122" y3="2.04342565" z3="-2.87092141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.194287" y3="1.10958891" z3="-0.96078118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9636413" y3="2.24955893" z3="-3.02378546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.62111393" y3="2.16119107" z3="-3.68367474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.96060969" y3="2.40994867" z3="-3.86379577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90598052" y3="2.43904405" z3="-4.46134982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.30403861" y3="2.88846394" z3="-4.78533752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.47500451" y3="3.17939038" z3="-3.40317451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.36916077" y3="3.59786186" z3="-4.20087847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.30988987" y3="4.18558763" z3="-2.83988705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.09447095" y3="5.51749523" z3="-3.10269272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.13221905" y3="3.89377374" z3="-2.18472501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.75272787" y3="6.26925122" z3="-2.65798343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.18015247" y3="4.98229048" z3="-4.46563854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.02709876" y3="5.92491847" z3="-3.93759807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.33584854" y3="5.28421988" z3="-5.09314273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.87130233" y3="6.98690615" z3="-4.14662271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48897942" y3="-2.27272424" z3="-0.29046044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44043282" y3="-3.04964507" z3="-1.07218293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01746658" y3="-2.68017194" z3="0.58645122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11388152" y3="-1.45509972" z3="-0.69721413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19233614" y3="-1.45112093" z3="-1.11022319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35187405" y3="-0.41224595" z3="-1.45101493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11620314" y3="-1.55051917" z3="-0.89478302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40746347" y3="-2.1026041" z3="-1.9690954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3396,.0917,-.1953;7.3909,.1574,.4043;6.6565,.4418,-.3555;4.7539,1.2576,-2.2833;4.3953,.486,-1.1898;2.7472,.8824,-3.6757;3.6719,1.7762,-3.1683;1.4386,2.634,-4.6712;1.5896,1.2954,-4.3992;.5667,2.9754,-5.2379;2.9137,-.4465,-3.428;3.0964,.129,-.9988;2.3858,-1.0256,-1.9754;.9158,-.8807,-1.8016;3.0808,-2.3518,-1.8013;-.147,-3.6431,.6916;.0164,-5.1675,-4.7545;-.2181,-4.9364,-3.7119;-.8321,-4.3139,-1.0802;.7966,-4.5184,-2.8526;-1.5312,-5.0693,-3.2561;-1.8391,-4.7536,-1.935;.5017,-4.2211,-1.5203;1.8266,-4.404,-3.1983;-2.3221,-5.3894,-3.938;-2.8739,-4.8265,-1.5916;-1.031,-3.8932,.2481;-2.1758,-3.6991,.8914;-3.0567,-4.1698,.4527;-2.1727,-3.5782,2.3599;-2.2308,-3.4212,5.1592;-3.3611,-3.8239,3.0628;-1.0133,-3.2584,3.0824;-1.0397,-3.1801,4.4717;-3.3891,-3.7481,4.4526;-4.2699,-4.0848,2.5136;-.0597,-3.0883,2.5772;-.1161,-2.9486,5.01;-4.3206,-3.9518,4.9877;-2.2509,-3.3685,6.2514;1.4095,-3.8473,-.6086;2.1635,-3.3236,-1.0515;.5339,.2991,-4.7173;-3.1009,-1.779,.0483;-2.9482,-1.042,1.2221;-1.8995,-.3807,1.5757;-.4471,.5311,1.2773;-.57,1.4623,-.3287;.9379,-.6944,1.4071;-.4421,1.6886,2.7499;-3.9309,-1.0616,2.1109;-3.7251,-.4607,3.3797;-.2918,.8024,-1.1689;.1593,2.294,-.3042;-1.5748,1.8946,-.4834;.995,-1.0708,2.4417;1.8954,-.2051,1.1571;.8203,-1.5306,.6991;-.4716,1.1241,3.6987;.4799,2.2983,2.7502;-1.3018,2.382,2.7297;-2.8594,-.9077,3.8939;-4.6419,-.6595,3.9505;-3.5736,.6261,3.2753;4.8255,-.645,.9946;4.4253,-1.9818,.8762;3.7693,-2.619,1.9223;3.53,-1.9059,3.0931;3.9787,-.6,3.2681;4.6346,.0234,2.2113;4.556,-2.4972,-.0764;3.3944,-3.6375,1.814;2.6667,-2.5029,4.1172;3.7716,-.0741,4.2008;4.9569,1.0636,2.3106;-.7731,.5284,-4.2673;-1.7619,-.4341,-4.4257;-1.4334,-1.6282,-5.0575;-.1576,-1.8676,-5.5591;.8248,-.9027,-5.3766;-1.0016,1.4541,-3.7323;-2.7725,-.282,-4.0455;-2.4549,-2.6701,-5.1804;.0554,-2.8094,-6.0585;1.8393,-1.0951,-5.7294;2.3071,-1.7951,5.0406;2.319,-3.6577,3.9669;-2.254,-3.5727,-5.9619;-3.4432,-2.5764,-4.4827;7.0971,1.1315,-1.5179;6.1447,1.5302,-2.5006;8.4746,1.4146,-1.7268;8.9006,2.0434,-2.8709;9.1943,1.1096,-.9608;9.9636,2.2496,-3.0238;6.6211,2.1612,-3.6837;7.9606,2.4099,-3.8638;5.906,2.439,-4.4613;8.304,2.8885,-4.7853;3.475,3.1794,-3.4032;2.3692,3.5979,-4.2009;4.3099,4.1856,-2.8399;4.0945,5.5175,-3.1027;5.1322,3.8938,-2.1847;4.7527,6.2693,-2.658;2.1802,4.9823,-4.4656;3.0271,5.9249,-3.9376;1.3358,5.2842,-5.0931;2.8713,6.9869,-4.1466;-4.489,-2.2727,-.2905;-4.4404,-3.0496,-1.0722;-5.0175,-2.6802,.5865;-5.1139,-1.4551,-.6972;-2.1923,-1.4511,-1.1102;-2.3519,-.4122,-1.451;-1.1162,-1.5505,-.8948;-2.4075,-2.1026,-1.9691;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650294204977</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007699104765 0.000756538779 0.019025474609 0.005337296169</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029968460 -0.002631580 0.000153287 0.000174983 0.000211802 0.000305846 0.000330751 0.000373026 0.000522408 0.000570937 0.000738556 0.000782459 0.000823688 0.000905607 0.000936786 0.001089291 0.001107520 0.001139512 0.001245202 0.001323918 0.001356207 0.001620122 0.001660807 0.001862591 0.001960278 0.002204966 0.002279672 0.002618546 0.002862320 0.003194412 0.003296922 0.003638682 0.003772402 0.003921568 0.004169731 0.005088069 0.005287188 0.005493075 0.005760063 0.006294595 0.006483560 0.007052794 0.007239141 0.007838554 0.007971856 0.008532818 0.009018576 0.009676707 0.009878385 0.010944732 0.011622823 0.012258719 0.012842004 0.013270606 0.013833552 0.014506084 0.014899158 0.015076369 0.015261101 0.015456632 0.016111232 0.016683841 0.017606887 0.018075964 0.018666361 0.018776736 0.019653754 0.020811297 0.021159580 0.021889043 0.022658996 0.023128188 0.024249193 0.025858263 0.026348057 0.026859544 0.028284322 0.028783901 0.030703441 0.031433616 0.032116915 0.033383575 0.033752064 0.034971024 0.037300662 0.038056433 0.039163933 0.039211744 0.040789502 0.042007750 0.043505253 0.043943992 0.045368480 0.048342064 0.049071647 0.049464264 0.050152324 0.050985160 0.052119779 0.052332478 0.052391530 0.052605029 0.053539629 0.054036737 0.054338579 0.054735211 0.055158458 0.056037477 0.056364814 0.056471247 0.057138015 0.058435659 0.059479669 0.060587777 0.061145208 0.061596209 0.061960707 0.062326238 0.064870067 0.065098867 0.065727700 0.065866002 0.066963462 0.071807569 0.073783795 0.074800639 0.076905619 0.080488840 0.083632889 0.085017340 0.085630688 0.086325077 0.087364852 0.089719073 0.090758515 0.093466642 0.094505494 0.095562924 0.095824208 0.097257947 0.097395911 0.098213663 0.099188043 0.099361649 0.099913485 0.100770131 0.101492121 0.102363148 0.102999925 0.103734819 0.104471363 0.106280600 0.106727666 0.107058370 0.108895180 0.109687179 0.110482574 0.112247271 0.113161842 0.113894986 0.117116119 0.118618475 0.119389791 0.121164357 0.123411926 0.124949256 0.125905687 0.130504381 0.131564627 0.134800015 0.137721658 0.141835077 0.142396809 0.145279008 0.146048907 0.146697846 0.148214397 0.150771451 0.152872801 0.157793130 0.160192816 0.172101352 0.172924518 0.175680836 0.182708132 0.183306197 0.186190209 0.187780243 0.191016568 0.193111528 0.196539247 0.197823877 0.201905868 0.204761686 0.206752109 0.209574111 0.209612836 0.212462824 0.212663023 0.216443428 0.218051465 0.224196654 0.224941022 0.229723490 0.233719737 0.234327664 0.234940022 0.243602710 0.254307163 0.256524543 0.260110150 0.264926150 0.278337790 0.282229540 0.285998348 0.288102032 0.292297933 0.299107068 0.303994634 0.304978449 0.305761660 0.312807559 0.314608043 0.321535471 0.321880682 0.328915769 0.344320119 0.346820585 0.349922997 0.350652752 0.354314427 0.360794465 0.361500379 0.377039502 0.377489952 0.386856544 0.407010112 0.421756587 0.425890016 0.450458202 0.465464379 0.468623928 0.475593315 0.478740562 0.480473209 0.487064976 0.500618259 0.508031174 0.532829910 0.562342012 0.565670155 0.583505116 0.592152089 0.596548482 0.603179934 0.637015689 0.641210168 0.643959624 0.665366773 0.671986687 0.683719530 0.685024398 0.691230763 0.697693366 0.703816226 0.712942446 0.722875068 0.738658119 0.749933374 0.759275546 0.771845745 0.776657810 0.805182150 0.808961717 0.812618452 0.813265157 0.819878568 0.820720141 0.829063042 0.830479513 0.831530881 0.841018192 0.844792478 0.844921088 0.850582696 0.857512184 0.863443214 0.864615217 0.870420190 0.873881189 0.883313536 0.887406776 0.891595443 0.895559380 0.917880097 0.922111574 0.930427268 0.932248847 0.963776795 0.975200567 0.983633965 0.999115824 1.009398741 1.024053358 1.039465756 1.046990764 1.053329392 1.059591574 1.085293011 1.085995295 1.095787287 1.104743926 1.110745590 1.112146591 1.122710331 1.123580441 1.134994488 1.138966953 1.170283593 1.170598261 1.179012336 1.185475782 1.194057745 1.210840795 1.219912584 1.243644220 1.295414304 1.312416568 1.318480478 1.323926654 1.325594549 1.326590660 1.332915925 1.340416853 1.341700323 1.355369361 1.374673557 1.380350181 1.380926217 1.385052267 1.394061064 1.418379851 1.550986433 1.659897123 1.771432949</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">59</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33928797" y3="0.08846982" z3="-0.1949732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3900149" y3="0.15866791" z3="0.40602144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6554092" y3="0.44233322" z3="-0.35385262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75198843" y3="1.25624916" z3="-2.28150944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39459215" y3="0.48205223" z3="-1.18943952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74667094" y3="0.87934962" z3="-3.6754662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66931965" y3="1.77399801" z3="-3.16609986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.43569624" y3="2.62962756" z3="-4.66929236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58871152" y3="1.29124966" z3="-4.39902592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.56366513" y3="2.97033447" z3="-5.23616468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91571585" y3="-0.4496811" z3="-3.42949916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09638282" y3="0.12235958" z3="-0.99944993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38660864" y3="-1.03101742" z3="-1.97812999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91658057" y3="-0.8861574" z3="-1.80526685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08121522" y3="-2.35756471" z3="-1.80526008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14773888" y3="-3.64212366" z3="0.69132247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01031711" y3="-5.17076103" z3="-4.75392161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22325843" y3="-4.93860442" z3="-3.71133239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83462601" y3="-4.31360502" z3="-1.07956666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79260803" y3="-4.52178331" z3="-2.85285003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.536309" y3="-5.06917333" z3="-3.25464497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84285091" y3="-4.75249226" z3="-1.93353415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49901531" y3="-4.22315492" z3="-1.52060125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82265695" y3="-4.40932856" z3="-3.19921185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.32795667" y3="-5.38856003" z3="-3.93588052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.87736172" y3="-4.82401623" z3="-1.58928348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03226339" y3="-3.8915232" z3="0.2484234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17643722" y3="-3.69501873" z3="0.89216529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05854481" y3="-4.16471789" z3="0.45409665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17267392" y3="-3.57285322" z3="2.36047401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22941441" y3="-3.4140833" z3="5.1598629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36156348" y3="-3.8153361" z3="3.06394696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01232957" y3="-3.25514389" z3="3.08243743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03790675" y3="-3.17607656" z3="4.4718106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38881016" y3="-3.73860241" z3="4.45376424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27129472" y3="-4.0743994" z3="2.51511594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0588496" y3="-3.08721071" z3="2.57653339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11372367" y3="-2.94621903" z3="5.00969307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32074183" y3="-3.93982486" z3="4.98924483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24898633" y3="-3.36050436" z3="6.25196876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40812359" y3="-3.85013926" z3="-0.60981359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16264353" y3="-3.32823728" z3="-1.05371041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.534552" y3="0.29421722" z3="-4.71878049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0994228" y3="-1.77468663" z3="0.04762526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94460381" y3="-1.03646214" z3="1.220538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.89461837" y3="-0.3763084" z3="1.57261865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.44068069" y3="0.53255855" z3="1.27355802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.56108109" y3="1.46207846" z3="-0.33379438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94168121" y3="-0.6955641" z3="1.40545729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.43363659" y3="1.69250212" z3="2.74441648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.92687256" y3="-1.05324095" z3="2.11000256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.71891623" y3="-0.45173239" z3="3.37831835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.28594944" y3="0.8004523" z3="-1.173104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.1718086" y3="2.2903526" z3="-0.31073388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.56383211" y3="1.89872662" z3="-0.4886238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99760531" y3="-1.07086693" z3="2.44049624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.90016124" y3="-0.2086129" z3="1.1552695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82251103" y3="-1.53227565" z3="0.69833018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.46525873" y3="1.12926584" z3="3.69402475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.49015612" y3="2.29959002" z3="2.74438381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.29143023" y3="2.3883372" z3="2.722746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.85351414" y3="-0.90006429" z3="3.89209553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.63568456" y3="-0.64836457" z3="3.94999688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.56547388" y3="0.63479244" z3="3.27312159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82627115" y3="-0.65055284" z3="0.99390487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42429664" y3="-1.98660936" z3="0.87307695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76912562" y3="-2.62551133" z3="1.91876379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53157079" y3="-1.91448121" z3="3.09119859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98183696" y3="-0.60954218" z3="3.26823269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.63781861" y3="0.01533197" z3="2.21238355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55290028" y3="-2.49996804" z3="-0.08111924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39274982" y3="-3.6432984" z3="1.80855765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66816296" y3="-2.51195802" z3="4.11474135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.77612244" y3="-0.08528541" z3="4.20211482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.96162221" y3="1.05484771" z3="2.31380421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77341259" y3="0.52344333" z3="-4.27347656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7617542" y3="-0.4389252" z3="-4.43258062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43188195" y3="-1.63285294" z3="-5.0618654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1550709" y3="-1.87244796" z3="-5.55981843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82669745" y3="-0.90772122" z3="-5.37706213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00301582" y3="1.44907037" z3="-3.73977261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77319731" y3="-0.28689211" z3="-4.05518291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45153284" y3="-2.67708627" z3="-5.18553897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06248943" y3="-2.81481761" z3="-6.06622247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84190326" y3="-1.10011368" z3="-5.72815979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.29042619" y3="-1.80159204" z3="5.02222804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3379789" y3="-3.66878314" z3="3.97950702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2415796" y3="-3.5807687" z3="-5.96792189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44619364" y3="-2.5878479" z3="-4.49035504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.09502414" y3="1.13496727" z3="-1.51482248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.14228564" y3="1.53284718" z3="-2.49752251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.47190499" y3="1.4222436" z3="-1.72223412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.89700397" y3="2.05438971" z3="-2.86493961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.19192433" y3="1.11784597" z3="-0.95630829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.95958612" y3="2.26378754" z3="-3.01666664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61775867" y3="2.16731013" z3="-3.67909235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9566972" y3="2.42016348" z3="-3.85779827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90237156" y3="2.44471568" z3="-4.45669994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.29945765" y3="2.90142684" z3="-4.77817528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.46969046" y3="3.17712732" z3="-3.39849487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.36368042" y3="3.59454555" z3="-4.19648401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.30150342" y3="4.18417909" z3="-2.8320167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.08286975" y3="5.5162672" z3="-3.09174995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.12378351" y3="3.8929948" z3="-2.1765212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.73863733" y3="6.26879889" z3="-2.64440696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.17140795" y3="4.97918829" z3="-4.45813127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.01528191" y3="5.92290636" z3="-3.92677068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.3268369" y3="5.28058576" z3="-5.08553461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.85671888" y3="6.98518902" z3="-4.13309162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4884704" y3="-2.26679814" z3="-0.28946047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44184677" y3="-3.0447611" z3="-1.07030496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01701636" y3="-2.67219396" z3="0.58847079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11221618" y3="-1.44862822" z3="-0.69682585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19115228" y3="-1.44938978" z3="-1.11180087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34918978" y3="-0.40949125" z3="-1.45288302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11415298" y3="-1.55101321" z3="-0.89746956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40913321" y3="-2.1016474" z3="-1.97080458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3393,.0885,-.195;7.39,.1587,.406;6.6554,.4423,-.3539;4.752,1.2562,-2.2815;4.3946,.4821,-1.1894;2.7467,.8793,-3.6755;3.6693,1.774,-3.1661;1.4357,2.6296,-4.6693;1.5887,1.2912,-4.399;.5637,2.9703,-5.2362;2.9157,-.4497,-3.4295;3.0964,.1224,-.9994;2.3866,-1.031,-1.9781;.9166,-.8862,-1.8053;3.0812,-2.3576,-1.8053;-.1477,-3.6421,.6913;.0103,-5.1708,-4.7539;-.2233,-4.9386,-3.7113;-.8346,-4.3136,-1.0796;.7926,-4.5218,-2.8529;-1.5363,-5.0692,-3.2546;-1.8429,-4.7525,-1.9335;.499,-4.2232,-1.5206;1.8227,-4.4093,-3.1992;-2.328,-5.3886,-3.9359;-2.8774,-4.824,-1.5893;-1.0323,-3.8915,.2484;-2.1764,-3.695,.8922;-3.0585,-4.1647,.4541;-2.1727,-3.5729,2.3605;-2.2294,-3.4141,5.1599;-3.3616,-3.8153,3.0639;-1.0123,-3.2551,3.0824;-1.0379,-3.1761,4.4718;-3.3888,-3.7386,4.4538;-4.2713,-4.0744,2.5151;-.0588,-3.0872,2.5765;-.1137,-2.9462,5.0097;-4.3207,-3.9398,4.9892;-2.249,-3.3605,6.252;1.4081,-3.8501,-.6098;2.1626,-3.3282,-1.0537;.5346,.2942,-4.7188;-3.0994,-1.7747,.0476;-2.9446,-1.0365,1.2205;-1.8946,-.3763,1.5726;-.4407,.5326,1.2736;-.5611,1.4621,-.3338;.9417,-.6956,1.4055;-.4336,1.6925,2.7444;-3.9269,-1.0532,2.11;-3.7189,-.4517,3.3783;-.2859,.8005,-1.1731;.1718,2.2904,-.3107;-1.5638,1.8987,-.4886;.9976,-1.0709,2.4405;1.9002,-.2086,1.1553;.8225,-1.5323,.6983;-.4653,1.1293,3.694;.4902,2.2996,2.7444;-1.2914,2.3883,2.7227;-2.8535,-.9001,3.8921;-4.6357,-.6484,3.95;-3.5655,.6348,3.2731;4.8263,-.6506,.9939;4.4243,-1.9866,.8731;3.7691,-2.6255,1.9188;3.5316,-1.9145,3.0912;3.9818,-.6095,3.2682;4.6378,.0153,2.2124;4.5529,-2.5,-.0811;3.3927,-3.6433,1.8086;2.6682,-2.512,4.1147;3.7761,-.0853,4.2021;4.9616,1.0548,2.3138;-.7734,.5234,-4.2735;-1.7618,-.4389,-4.4326;-1.4319,-1.6329,-5.0619;-.1551,-1.8724,-5.5598;.8267,-.9077,-5.3771;-1.003,1.4491,-3.7398;-2.7732,-.2869,-4.0552;-2.4515,-2.6771,-5.1855;.0625,-2.8148,-6.0662;1.8419,-1.1001,-5.7282;2.2904,-1.8016,5.0222;2.338,-3.6688,3.9795;-2.2416,-3.5808,-5.9679;-3.4462,-2.5878,-4.4904;7.095,1.135,-1.5148;6.1423,1.5328,-2.4975;8.4719,1.4222,-1.7222;8.897,2.0544,-2.8649;9.1919,1.1178,-.9563;9.9596,2.2638,-3.0167;6.6178,2.1673,-3.6791;7.9567,2.4202,-3.8578;5.9024,2.4447,-4.4567;8.2995,2.9014,-4.7782;3.4697,3.1771,-3.3985;2.3637,3.5945,-4.1965;4.3015,4.1842,-2.832;4.0829,5.5163,-3.0917;5.1238,3.893,-2.1765;4.7386,6.2688,-2.6444;2.1714,4.9792,-4.4581;3.0153,5.9229,-3.9268;1.3268,5.2806,-5.0855;2.8567,6.9852,-4.1331;-4.4885,-2.2668,-.2895;-4.4418,-3.0448,-1.0703;-5.017,-2.6722,.5885;-5.1122,-1.4486,-.6968;-2.1912,-1.4494,-1.1118;-2.3492,-.4095,-1.4529;-1.1142,-1.551,-.8975;-2.4091,-2.1016,-1.9708;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650298143722</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.011496967185 0.000906108625 0.017780948220 0.005336677815</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029977446 -0.002512983 0.000153504 0.000175192 0.000212732 0.000308036 0.000330682 0.000373250 0.000524510 0.000571498 0.000740555 0.000782493 0.000828206 0.000910529 0.000936821 0.001089381 0.001107513 0.001141507 0.001245606 0.001323970 0.001356385 0.001620658 0.001668998 0.001862388 0.001961191 0.002205138 0.002279700 0.002627159 0.002868748 0.003232970 0.003297161 0.003771694 0.003870085 0.004075869 0.004938915 0.005239855 0.005287209 0.005499603 0.005785450 0.006306202 0.006487391 0.007067472 0.007241002 0.007843375 0.007971829 0.008547109 0.009023110 0.009698263 0.009888717 0.010944409 0.011622372 0.012257042 0.012841968 0.013270436 0.013833755 0.014505802 0.014902155 0.015074490 0.015270483 0.015458722 0.016124707 0.016707026 0.017695467 0.018093532 0.018678992 0.018785322 0.019679717 0.020819449 0.021157677 0.021889334 0.022667212 0.023162119 0.024254361 0.025858297 0.026348674 0.026861342 0.028284675 0.028784038 0.030704052 0.031434598 0.032116848 0.033383584 0.033751888 0.034970971 0.037300697 0.038056860 0.039163886 0.039212438 0.040789522 0.042068751 0.043506334 0.043944568 0.045368391 0.048342245 0.049071634 0.049464937 0.050152528 0.050985340 0.052119810 0.052332475 0.052391506 0.052606210 0.053540718 0.054036965 0.054347132 0.054735835 0.055158667 0.056037513 0.056364716 0.056471298 0.057137988 0.058437399 0.059482466 0.060600736 0.061146345 0.061622810 0.061960605 0.062326285 0.064881691 0.065209525 0.065729086 0.065869839 0.066998994 0.071811068 0.073784018 0.074800858 0.076905983 0.080491999 0.083632904 0.085018218 0.085630410 0.086329346 0.087369216 0.089719122 0.090762362 0.093471668 0.094505441 0.095562929 0.095824191 0.097257967 0.097395918 0.098213771 0.099188161 0.099363635 0.099914153 0.100772213 0.101493296 0.102363389 0.103000391 0.103734733 0.104471368 0.106282205 0.106726945 0.107064287 0.108895312 0.109687914 0.110515527 0.112247412 0.113167590 0.113925423 0.117151359 0.118624551 0.119401066 0.121165034 0.123411837 0.124952552 0.125949880 0.130504461 0.131564357 0.134800016 0.138830655 0.141900089 0.142396765 0.145307852 0.146072741 0.146698842 0.148215040 0.150773091 0.152871188 0.157806328 0.160192196 0.172104736 0.172924416 0.175681331 0.182709149 0.183305462 0.186191131 0.187778674 0.191027784 0.193112756 0.196541255 0.197823749 0.201907948 0.204761481 0.206752138 0.209599120 0.209613468 0.212505813 0.212671276 0.216444027 0.218054428 0.224196716 0.224941033 0.229736249 0.233720139 0.234331540 0.234940708 0.243608598 0.254309089 0.256524534 0.260113834 0.264929632 0.278339765 0.282229560 0.285998362 0.288103979 0.292306399 0.299159848 0.303997614 0.304978402 0.305760209 0.312808202 0.314621584 0.321535876 0.321881453 0.328915826 0.344320084 0.346930529 0.349927532 0.350656249 0.354328758 0.360794740 0.361509041 0.377039996 0.377522871 0.387008112 0.407024385 0.421769635 0.425889004 0.450458363 0.465762920 0.468624528 0.475603524 0.479045845 0.480486625 0.487075308 0.500622684 0.508414991 0.533135973 0.563076917 0.565753033 0.583617016 0.592152487 0.596546348 0.603206994 0.637015856 0.641209936 0.643991018 0.665366757 0.672156166 0.683719711 0.685024585 0.691230952 0.697700478 0.703816405 0.712944250 0.722969633 0.738661128 0.749933474 0.759275538 0.771846440 0.776658812 0.805182238 0.808961891 0.812620633 0.813265396 0.819924590 0.820721626 0.829072582 0.830491472 0.831530906 0.841018109 0.844794221 0.844921333 0.850584810 0.857512327 0.863443335 0.864615880 0.870459007 0.873905974 0.883314411 0.887406863 0.891595411 0.895560799 0.917883760 0.922114216 0.930427744 0.932249109 0.963777528 0.975201318 0.983642618 0.999115955 1.009496208 1.024062619 1.039495141 1.047053348 1.053382023 1.059649282 1.085295392 1.085998659 1.095880401 1.104743916 1.110758469 1.112146541 1.122710482 1.123580508 1.134994486 1.138966997 1.170283845 1.170598268 1.179012410 1.185475780 1.194059479 1.210846284 1.219939759 1.249648884 1.295510009 1.312416167 1.318933971 1.323944114 1.325776399 1.327102482 1.332916833 1.340586049 1.341709719 1.355373697 1.374673723 1.380354724 1.380926787 1.385912005 1.395441330 1.418383343 1.550991404 1.659904314 1.771463041</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">60</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33909929" y3="0.08530222" z3="-0.19470272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38920175" y3="0.15992422" z3="0.40774164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65437077" y3="0.44277543" z3="-0.3522206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75002414" y3="1.2548916" z3="-2.27970652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39394997" y3="0.47803855" z3="-1.18912122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74594793" y3="0.87619552" z3="-3.67507477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66654541" y3="1.77185626" z3="-3.16376843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.43183739" y3="2.62578708" z3="-4.66637573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58740078" y3="1.28716576" z3="-4.39828931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.55942687" y3="2.96565498" z3="-5.23317246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91745429" y3="-0.45289417" z3="-3.43093906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0964383" y3="0.11546515" z3="-1.00001409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38768034" y3="-1.03674441" z3="-1.98084473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91751199" y3="-0.89239843" z3="-1.80870718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08214524" y3="-2.36348534" z3="-1.80917808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14805869" y3="-3.64144441" z3="0.69133889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00486148" y3="-5.17545742" z3="-4.75268572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22777389" y3="-4.94188447" z3="-3.71022099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83688912" y3="-4.31310863" z3="-1.07885472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78903579" y3="-4.52552915" z3="-2.85285431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54076197" y3="-5.07011992" z3="-3.25260279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84624059" y3="-4.75138096" z3="-1.93177222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49660753" y3="-4.22513031" z3="-1.52074724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81905961" y3="-4.41499658" z3="-3.19989378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.33294382" y3="-5.38971939" z3="-3.93286474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88067699" y3="-4.82115236" z3="-1.58682842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03320247" y3="-3.88968363" z3="0.24889384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17667873" y3="-3.69151701" z3="0.89296632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05958257" y3="-4.15970417" z3="0.45531711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17258221" y3="-3.56759609" z3="2.3609921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22856874" y3="-3.40623996" z3="5.16009649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36188336" y3="-3.80681297" z3="3.06485681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0114848" y3="-3.2516693" z3="3.08234338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03670833" y3="-3.17143734" z3="4.47159922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38873552" y3="-3.72881706" z3="4.45456808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27214796" y3="-4.06441456" z3="2.51644503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05751628" y3="-3.08664491" z3="2.57629061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11184037" y3="-2.94356088" z3="5.00919039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32098631" y3="-3.92745602" z3="4.99042101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2476537" y3="-3.3519469" z3="6.25216712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40689663" y3="-3.85276693" z3="-0.61092979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16212134" y3="-3.3329355" z3="-1.05582319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53487377" y3="0.28919422" z3="-4.71966855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09791405" y3="-1.76920292" z3="0.04626186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94096117" y3="-1.03040319" z3="1.21827267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.89010549" y3="-0.37087829" z3="1.56876818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.43382037" y3="0.53424179" z3="1.26934759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.55084522" y3="1.46216548" z3="-0.33912107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94564935" y3="-0.69687835" z3="1.4041997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.42548295" y3="1.69628076" z3="2.73841767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.92236223" y3="-1.04532958" z3="2.10882994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.71293988" y3="-0.4425061" z3="3.37601021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.27851921" y3="0.79862895" z3="-1.17784723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.18444779" y3="2.2877519" z3="-0.31713184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.55180956" y3="1.90166783" z3="-0.49442899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00023407" y3="-1.07079597" z3="2.43986019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.90527723" y3="-0.21252819" z3="1.15359035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82496152" y3="-1.53443296" z3="0.69838399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.45818056" y3="1.13498937" z3="3.68906592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.49812109" y3="2.30275745" z3="2.73784508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.28257202" y3="2.39213605" z3="2.71492661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.84803213" y3="-0.89108965" z3="3.89001403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.62955746" y3="-0.6372352" z3="3.9484843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.55809901" y3="0.64358142" z3="3.2692442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82712171" y3="-0.65574228" z3="0.99323756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42359253" y3="-1.99111429" z3="0.87036256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76855371" y3="-2.63112125" z3="1.91529153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53285866" y3="-1.92191553" z3="3.08922488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98525606" y3="-0.61803475" z3="3.2685545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64087532" y3="0.00796703" z3="2.21313364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55063913" y3="-2.50292665" z3="-0.08473824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39114377" y3="-3.6483166" z3="1.80383366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66991839" y3="-2.52065728" z3="4.11249649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.78105415" y3="-0.09538371" z3="4.20363466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.96603441" y3="1.04683627" z3="2.3160971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77457539" y3="0.51669169" z3="-4.27465638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76143508" y3="-0.44747845" z3="-4.43679347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42866442" y3="-1.64151942" z3="-5.06767021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15028306" y3="-1.87881169" z3="-5.56438803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83001133" y3="-0.91234822" z3="-5.3787101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00660542" y3="1.44227267" z3="-3.74157767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77397893" y3="-0.29637287" z3="-4.06140155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4486767" y3="-2.68494432" z3="-5.19541948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06770852" y3="-2.82037608" z3="-6.06890851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84631645" y3="-1.10329124" z3="-5.72844834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30820714" y3="-1.81302372" z3="5.03606976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32483409" y3="-3.67646854" z3="3.96181946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24074893" y3="-3.5896854" z3="-5.97509647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44188799" y3="-2.58895771" z3="-4.50374709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.09288294" y3="1.13844107" z3="-1.51176758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.139711" y3="1.53543221" z3="-2.4944068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46907948" y3="1.42997425" z3="-1.71768026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.89315709" y3="2.06545007" z3="-2.858899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.18942569" y3="1.12627783" z3="-0.95178006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.95522882" y3="2.27821107" z3="-3.00945351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61418323" y3="2.17337512" z3="-3.67446828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9525028" y3="2.43036707" z3="-3.85174467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89853254" y3="2.45022998" z3="-4.45203312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2945115" y3="2.91435238" z3="-4.7709501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4638267" y3="3.17505525" z3="-3.39337961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.35745032" y3="3.59171441" z3="-4.19123984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.29275062" y3="4.18275517" z3="-2.82405283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.07098288" y3="5.51482403" z3="-3.08091771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.11522792" y3="3.89206476" z3="-2.1685617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.72438105" y3="6.26788464" z3="-2.63117721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.16215338" y3="4.97629411" z3="-4.45026043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.00319905" y3="5.92074555" z3="-3.91603765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.31749374" y3="5.27682042" z3="-5.0779568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.84220627" y3="6.98296746" z3="-4.12012661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48778895" y3="-2.26031105" z3="-0.28883923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44271393" y3="-3.03947743" z3="-1.06851656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01590081" y3="-2.66408184" z3="0.59005335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11124066" y3="-1.44222155" z3="-0.69674978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18997971" y3="-1.44686711" z3="-1.11426069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34535647" y3="-0.40654678" z3="-1.45541152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11271756" y3="-1.55194855" z3="-0.90090226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.410859" y3="-2.09891612" z3="-1.97307905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0853,-.1947;7.3892,.1599,.4077;6.6544,.4428,-.3522;4.75,1.2549,-2.2797;4.3939,.478,-1.1891;2.7459,.8762,-3.6751;3.6665,1.7719,-3.1638;1.4318,2.6258,-4.6664;1.5874,1.2872,-4.3983;.5594,2.9657,-5.2332;2.9175,-.4529,-3.4309;3.0964,.1155,-1;2.3877,-1.0367,-1.9808;.9175,-.8924,-1.8087;3.0821,-2.3635,-1.8092;-.1481,-3.6414,.6913;.0049,-5.1755,-4.7527;-.2278,-4.9419,-3.7102;-.8369,-4.3131,-1.0789;.789,-4.5255,-2.8529;-1.5408,-5.0701,-3.2526;-1.8462,-4.7514,-1.9318;.4966,-4.2251,-1.5207;1.8191,-4.415,-3.1999;-2.3329,-5.3897,-3.9329;-2.8807,-4.8212,-1.5868;-1.0332,-3.8897,.2489;-2.1767,-3.6915,.893;-3.0596,-4.1597,.4553;-2.1726,-3.5676,2.361;-2.2286,-3.4062,5.1601;-3.3619,-3.8068,3.0649;-1.0115,-3.2517,3.0823;-1.0367,-3.1714,4.4716;-3.3887,-3.7288,4.4546;-4.2721,-4.0644,2.5164;-.0575,-3.0866,2.5763;-.1118,-2.9436,5.0092;-4.321,-3.9275,4.9904;-2.2477,-3.3519,6.2522;1.4069,-3.8528,-.6109;2.1621,-3.3329,-1.0558;.5349,.2892,-4.7197;-3.0979,-1.7692,.0463;-2.941,-1.0304,1.2183;-1.8901,-.3709,1.5688;-.4338,.5342,1.2693;-.5508,1.4622,-.3391;.9456,-.6969,1.4042;-.4255,1.6963,2.7384;-3.9224,-1.0453,2.1088;-3.7129,-.4425,3.376;-.2785,.7986,-1.1778;.1844,2.2878,-.3171;-1.5518,1.9017,-.4944;1.0002,-1.0708,2.4399;1.9053,-.2125,1.1536;.825,-1.5344,.6984;-.4582,1.135,3.6891;.4981,2.3028,2.7378;-1.2826,2.3921,2.7149;-2.848,-.8911,3.89;-4.6296,-.6372,3.9485;-3.5581,.6436,3.2692;4.8271,-.6557,.9932;4.4236,-1.9911,.8704;3.7686,-2.6311,1.9153;3.5329,-1.9219,3.0892;3.9853,-.618,3.2686;4.6409,.008,2.2131;4.5506,-2.5029,-.0847;3.3911,-3.6483,1.8038;2.6699,-2.5207,4.1125;3.7811,-.0954,4.2036;4.966,1.0468,2.3161;-.7746,.5167,-4.2747;-1.7614,-.4475,-4.4368;-1.4287,-1.6415,-5.0677;-.1503,-1.8788,-5.5644;.83,-.9123,-5.3787;-1.0066,1.4423,-3.7416;-2.774,-.2964,-4.0614;-2.4487,-2.6849,-5.1954;.0677,-2.8204,-6.0689;1.8463,-1.1033,-5.7284;2.3082,-1.813,5.0361;2.3248,-3.6765,3.9618;-2.2407,-3.5897,-5.9751;-3.4419,-2.589,-4.5037;7.0929,1.1384,-1.5118;6.1397,1.5354,-2.4944;8.4691,1.43,-1.7177;8.8932,2.0655,-2.8589;9.1894,1.1263,-.9518;9.9552,2.2782,-3.0095;6.6142,2.1734,-3.6745;7.9525,2.4304,-3.8517;5.8985,2.4502,-4.452;8.2945,2.9144,-4.771;3.4638,3.1751,-3.3934;2.3575,3.5917,-4.1912;4.2928,4.1828,-2.8241;4.071,5.5148,-3.0809;5.1152,3.8921,-2.1686;4.7244,6.2679,-2.6312;2.1622,4.9763,-4.4503;3.0032,5.9207,-3.916;1.3175,5.2768,-5.078;2.8422,6.983,-4.1201;-4.4878,-2.2603,-.2888;-4.4427,-3.0395,-1.0685;-5.0159,-2.6641,.5901;-5.1112,-1.4422,-.6967;-2.19,-1.4469,-1.1143;-2.3454,-.4065,-1.4554;-1.1127,-1.5519,-.9009;-2.4109,-2.0989,-1.9731;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650331941213</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009249389519 0.000676184040 0.016100982421 0.005338402587</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.029997730 -0.001608052 0.000154981 0.000175640 0.000212652 0.000308367 0.000335853 0.000373453 0.000524491 0.000571513 0.000743744 0.000782879 0.000830591 0.000915480 0.000937511 0.001089555 0.001108293 0.001143009 0.001245964 0.001324080 0.001356501 0.001620643 0.001668747 0.001862593 0.001961581 0.002206315 0.002279545 0.002630321 0.002870922 0.003235976 0.003297096 0.003771656 0.003881673 0.004087702 0.005054965 0.005287121 0.005487367 0.005717876 0.006125687 0.006391355 0.006524803 0.007081568 0.007240743 0.007843433 0.007972005 0.008556330 0.009023007 0.009700250 0.009890520 0.010944473 0.011622540 0.012257624 0.012841946 0.013271186 0.013833434 0.014511825 0.014904855 0.015090818 0.015271722 0.015458674 0.016137515 0.016717742 0.017720052 0.018114149 0.018682183 0.018790441 0.019699471 0.020840941 0.021159999 0.021888997 0.022686313 0.023240531 0.024261574 0.025858859 0.026349795 0.026863478 0.028284621 0.028784179 0.030704776 0.031434352 0.032117378 0.033383529 0.033751988 0.034977749 0.037300716 0.038056687 0.039164323 0.039214264 0.040789594 0.042093841 0.043506384 0.043945186 0.045368445 0.048342379 0.049072072 0.049467088 0.050152663 0.050985286 0.052119819 0.052332472 0.052391481 0.052606074 0.053540261 0.054037048 0.054346694 0.054735731 0.055159092 0.056039380 0.056364615 0.056471510 0.057137971 0.058438053 0.059482837 0.060601788 0.061146430 0.061622394 0.061961404 0.062326461 0.064883877 0.065234431 0.065729062 0.065869856 0.066999620 0.071810750 0.073784190 0.074800974 0.076906110 0.080492071 0.083632909 0.085018592 0.085631316 0.086331033 0.087371893 0.089719005 0.090761869 0.093470680 0.094505532 0.095562914 0.095824428 0.097258332 0.097396021 0.098214028 0.099188309 0.099364219 0.099914190 0.100774166 0.101495209 0.102364023 0.103000684 0.103734513 0.104472197 0.106282766 0.106729891 0.107064169 0.108895292 0.109688107 0.110522568 0.112247439 0.113167055 0.113924905 0.117153492 0.118624797 0.119400025 0.121165199 0.123411800 0.124953595 0.125992005 0.130504353 0.131563800 0.134800037 0.139413648 0.141966541 0.142397475 0.145321763 0.146092084 0.146698351 0.148215542 0.150772581 0.152872616 0.157873304 0.160197734 0.172108646 0.172925225 0.175682058 0.182709020 0.183314286 0.186191008 0.187784761 0.191035365 0.193112211 0.196542693 0.197824133 0.201907922 0.204761713 0.206752141 0.209599079 0.209613433 0.212508816 0.212672309 0.216446312 0.218056149 0.224197892 0.224941031 0.229739027 0.233721016 0.234332513 0.234940815 0.243612922 0.254309174 0.256524524 0.260114112 0.264929524 0.278342684 0.282229591 0.285998430 0.288103890 0.292307499 0.299200369 0.303997833 0.304980085 0.305772617 0.312808394 0.314626415 0.321536179 0.321883696 0.328917494 0.344322360 0.347120059 0.349931831 0.350669202 0.354343194 0.360794851 0.361521743 0.377041545 0.377528281 0.387029520 0.407164709 0.421790816 0.425901620 0.450458359 0.465943024 0.468624547 0.475611566 0.479606050 0.480489199 0.487074868 0.500690690 0.508490182 0.533270317 0.563811737 0.565987227 0.583615457 0.592152470 0.596572136 0.603213211 0.637017262 0.641216507 0.644031161 0.665366738 0.672268027 0.683719712 0.685025190 0.691230990 0.697706223 0.703816440 0.712968890 0.722978092 0.738665221 0.749933475 0.759275524 0.771846924 0.776659827 0.805182391 0.808963796 0.812622407 0.813267778 0.819969580 0.820722255 0.829075977 0.830512185 0.831532010 0.841019593 0.844799312 0.844922332 0.850587747 0.857513508 0.863452249 0.864615925 0.870499361 0.873917182 0.883314907 0.887408246 0.891598729 0.895560948 0.917885290 0.922117368 0.930428356 0.932249103 0.963777939 0.975203296 0.983645771 0.999116089 1.009548705 1.024065862 1.039505259 1.047068997 1.053396551 1.059663170 1.085295407 1.085998845 1.095882692 1.104744585 1.110760942 1.112149275 1.122710582 1.123580669 1.134994678 1.138968128 1.170285913 1.170599097 1.179013486 1.185475936 1.194060797 1.210877105 1.219962647 1.255318054 1.295586046 1.312436531 1.319056751 1.323947591 1.325829934 1.327811207 1.332916922 1.340777088 1.341731658 1.355383406 1.374674629 1.380354907 1.380926672 1.386094600 1.396121767 1.418383565 1.550995533 1.659919679 1.771477732</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">61</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33891715" y3="0.08167077" z3="-0.1944735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38851121" y3="0.16085145" z3="0.40922051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65336577" y3="0.44292094" z3="-0.35073229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74797354" y3="1.25342417" z3="-2.27772591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3932664" y3="0.47368688" z3="-1.18874606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74548908" y3="0.87266961" z3="-3.67497952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66365253" y3="1.76959067" z3="-3.16117401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.42817596" y3="2.62130745" z3="-4.66364091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58669045" y3="1.28220852" z3="-4.39853031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.55535749" y3="2.96038946" z3="-5.23030142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91942182" y3="-0.45647262" z3="-3.43271242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09644626" y3="0.10824424" z3="-1.00065387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38892039" y3="-1.04281453" z3="-1.98383687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91856747" y3="-0.89906499" z3="-1.8125124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08345387" y3="-2.3696445" z3="-1.81340874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1484525" y3="-3.63944506" z3="0.69015907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00068171" y3="-5.18126972" z3="-4.75209869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23222654" y3="-4.94617073" z3="-3.70971912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83880258" y3="-4.31265868" z3="-1.07877385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78584701" y3="-4.53039797" z3="-2.85340439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54515701" y3="-5.07161301" z3="-3.25113075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84934275" y3="-4.75041784" z3="-1.93053356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49469752" y3="-4.22779872" z3="-1.52152714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81578621" y3="-4.42174077" z3="-3.20123592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.33876241" y3="-5.39021377" z3="-3.93065841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88388301" y3="-4.8175465" z3="-1.58499019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03402851" y3="-3.8868941" z3="0.24835492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17735422" y3="-3.68603933" z3="0.89242295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06065662" y3="-4.15433027" z3="0.45589232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17233976" y3="-3.56194452" z3="2.36070007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22746826" y3="-3.39912083" z3="5.15989795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36185284" y3="-3.79850972" z3="3.06498341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01031728" y3="-3.24856534" z3="3.08189247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03511993" y3="-3.16750345" z3="4.47113938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3883631" y3="-3.71964974" z3="4.45467432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27269619" y3="-4.05470776" z3="2.51691817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05609827" y3="-3.08604524" z3="2.57554637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1097606" y3="-2.94121369" z3="5.00847541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32091129" y3="-3.91608474" z3="4.99074576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24647598" y3="-3.34393059" z3="6.25189878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40627472" y3="-3.85602789" z3="-0.61263666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16196378" y3="-3.33813321" z3="-1.05851612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53583583" y3="0.28280799" z3="-4.72252744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.096067" y3="-1.76498901" z3="0.04511054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93733931" y3="-1.02441884" z3="1.21602187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8854821" y3="-0.36566875" z3="1.56447067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.42678543" y3="0.53585247" z3="1.26536051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.54027309" y3="1.46153073" z3="-0.34454524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94957584" y3="-0.69854478" z3="1.40301889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.41726531" y3="1.69993939" z3="2.73277382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.91802392" y3="-1.03690906" z3="2.10723353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.70644893" y3="-0.43318869" z3="3.37385575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.27249562" y3="0.79494894" z3="-1.18274926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.20054878" y3="2.28308538" z3="-0.32482764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.53929115" y3="1.9070092" z3="-0.49891557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00284063" y3="-1.07139657" z3="2.43915959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91070898" y3="-0.21710526" z3="1.15228396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82688809" y3="-1.53661509" z3="0.69794551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.45201739" y3="1.13993811" z3="3.68414561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5090483" y3="2.3034842" z3="2.73180668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.27236749" y3="2.39916656" z3="2.70786193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.84141398" y3="-0.88267407" z3="3.88724505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.62274771" y3="-0.62616421" z3="3.94747591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.55026513" y3="0.65258684" z3="3.2658857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82816407" y3="-0.66133816" z3="0.99275961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42289188" y3="-1.99605047" z3="0.86820546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76875384" y3="-2.63712379" z3="1.91317325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53512701" y3="-1.92946456" z3="3.08846587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98914468" y3="-0.62633447" z3="3.26918444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64454153" y3="0.00050349" z3="2.21416924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54777168" y3="-2.50634503" z3="-0.08810902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38993625" y3="-3.65375727" z3="1.80047183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6716215" y3="-2.52801185" z3="4.11125168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.78655473" y3="-0.10473653" z3="4.20521823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.97113963" y3="1.03881624" z3="2.31848988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77383321" y3="0.51043371" z3="-4.28044052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76043996" y3="-0.45271421" z3="-4.44388531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42711837" y3="-1.64619187" z3="-5.07316033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14844951" y3="-1.88436432" z3="-5.56677298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83165327" y3="-0.91865657" z3="-5.37987966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00642744" y3="1.43554639" z3="-3.74623528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77344817" y3="-0.3022099" z3="-4.06905791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44661878" y3="-2.68973625" z3="-5.20197282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.069556" y3="-2.82599641" z3="-6.06745211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84814003" y3="-1.10995528" z3="-5.72729164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.29527789" y3="-1.81766412" z3="5.02100058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33974191" y3="-3.68519406" z3="3.97309429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23480142" y3="-3.59652341" z3="-5.97776791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44472727" y3="-2.59490967" z3="-4.51504588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.09070908" y3="1.1417193" z3="-1.50884165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13702289" y3="1.53798898" z3="-2.49125703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46620617" y3="1.43747864" z3="-1.7134119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8891466" y3="2.07647271" z3="-2.85311714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.18695201" y3="1.13429615" z3="-0.94769038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.95069305" y3="2.29255838" z3="-3.00262141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61036468" y3="2.17963264" z3="-3.66979347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94805869" y3="2.44077402" z3="-3.84577543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89436399" y3="2.45608726" z3="-4.44717961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.28923197" y3="2.92763447" z3="-4.76379593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.45765658" y3="3.17289794" z3="-3.38761427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.35082748" y3="3.588718" z3="-4.18525758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.28364048" y3="4.18135653" z3="-2.81523977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.05875738" y3="5.51348216" z3="-3.06909619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.10636537" y3="3.89113158" z3="-2.15987118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.71005417" y3="6.26701642" z3="-2.61720851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.15213345" y3="4.97359925" z3="-4.44092488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.99048689" y3="5.91884006" z3="-3.90389736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.30711061" y3="5.27364882" z3="-5.06837014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.82706357" y3="6.98115585" z3="-4.10561119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4872269" y3="-2.25383005" z3="-0.28833242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4442122" y3="-3.03393723" z3="-1.06728195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01539021" y3="-2.6556706" z3="0.59134803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10953767" y3="-1.43484745" z3="-0.69642307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18940222" y3="-1.44432188" z3="-1.11706776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3449876" y3="-0.40529607" z3="-1.45996575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11291649" y3="-1.54844653" z3="-0.90443964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40985037" y3="-2.0971643" z3="-1.9740738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3389,.0817,-.1945;7.3885,.1609,.4092;6.6534,.4429,-.3507;4.748,1.2534,-2.2777;4.3933,.4737,-1.1887;2.7455,.8727,-3.675;3.6637,1.7696,-3.1612;1.4282,2.6213,-4.6636;1.5867,1.2822,-4.3985;.5554,2.9604,-5.2303;2.9194,-.4565,-3.4327;3.0964,.1082,-1.0007;2.3889,-1.0428,-1.9838;.9186,-.8991,-1.8125;3.0835,-2.3696,-1.8134;-.1485,-3.6394,.6902;-.0007,-5.1813,-4.7521;-.2322,-4.9462,-3.7097;-.8388,-4.3127,-1.0788;.7858,-4.5304,-2.8534;-1.5452,-5.0716,-3.2511;-1.8493,-4.7504,-1.9305;.4947,-4.2278,-1.5215;1.8158,-4.4217,-3.2012;-2.3388,-5.3902,-3.9307;-2.8839,-4.8175,-1.585;-1.034,-3.8869,.2484;-2.1774,-3.686,.8924;-3.0607,-4.1543,.4559;-2.1723,-3.5619,2.3607;-2.2275,-3.3991,5.1599;-3.3619,-3.7985,3.065;-1.0103,-3.2486,3.0819;-1.0351,-3.1675,4.4711;-3.3884,-3.7196,4.4547;-4.2727,-4.0547,2.5169;-.0561,-3.086,2.5755;-.1098,-2.9412,5.0085;-4.3209,-3.9161,4.9907;-2.2465,-3.3439,6.2519;1.4063,-3.856,-.6126;2.162,-3.3381,-1.0585;.5358,.2828,-4.7225;-3.0961,-1.765,.0451;-2.9373,-1.0244,1.216;-1.8855,-.3657,1.5645;-.4268,.5359,1.2654;-.5403,1.4615,-.3445;.9496,-.6985,1.403;-.4173,1.6999,2.7328;-3.918,-1.0369,2.1072;-3.7064,-.4332,3.3739;-.2725,.7949,-1.1827;.2005,2.2831,-.3248;-1.5393,1.907,-.4989;1.0028,-1.0714,2.4392;1.9107,-.2171,1.1523;.8269,-1.5366,.6979;-.452,1.1399,3.6841;.509,2.3035,2.7318;-1.2724,2.3992,2.7079;-2.8414,-.8827,3.8872;-4.6227,-.6262,3.9475;-3.5503,.6526,3.2659;4.8282,-.6613,.9928;4.4229,-1.9961,.8682;3.7688,-2.6371,1.9132;3.5351,-1.9295,3.0885;3.9891,-.6263,3.2692;4.6445,.0005,2.2142;4.5478,-2.5063,-.0881;3.3899,-3.6538,1.8005;2.6716,-2.528,4.1113;3.7866,-.1047,4.2052;4.9711,1.0388,2.3185;-.7738,.5104,-4.2804;-1.7604,-.4527,-4.4439;-1.4271,-1.6462,-5.0732;-.1484,-1.8844,-5.5668;.8317,-.9187,-5.3799;-1.0064,1.4355,-3.7462;-2.7734,-.3022,-4.0691;-2.4466,-2.6897,-5.202;.0696,-2.826,-6.0675;1.8481,-1.11,-5.7273;2.2953,-1.8177,5.021;2.3397,-3.6852,3.9731;-2.2348,-3.5965,-5.9778;-3.4447,-2.5949,-4.515;7.0907,1.1417,-1.5088;6.137,1.538,-2.4913;8.4662,1.4375,-1.7134;8.8891,2.0765,-2.8531;9.187,1.1343,-.9477;9.9507,2.2926,-3.0026;6.6104,2.1796,-3.6698;7.9481,2.4408,-3.8458;5.8944,2.4561,-4.4472;8.2892,2.9276,-4.7638;3.4577,3.1729,-3.3876;2.3508,3.5887,-4.1853;4.2836,4.1814,-2.8152;4.0588,5.5135,-3.0691;5.1064,3.8911,-2.1599;4.7101,6.267,-2.6172;2.1521,4.9736,-4.4409;2.9905,5.9188,-3.9039;1.3071,5.2736,-5.0684;2.8271,6.9812,-4.1056;-4.4872,-2.2538,-.2883;-4.4442,-3.0339,-1.0673;-5.0154,-2.6557,.5913;-5.1095,-1.4348,-.6964;-2.1894,-1.4443,-1.1171;-2.345,-.4053,-1.46;-1.1129,-1.5484,-.9044;-2.4099,-2.0972,-1.9741;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650350793911</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006731485243 0.000512113079 0.016816228088 0.005339349680</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030006269 -0.001200330 0.000154975 0.000175614 0.000213001 0.000309242 0.000335607 0.000373440 0.000526033 0.000573503 0.000748004 0.000782903 0.000832677 0.000918374 0.000937358 0.001089573 0.001109051 0.001144843 0.001246143 0.001325043 0.001356541 0.001620839 0.001669442 0.001865163 0.001961948 0.002211474 0.002283342 0.002632422 0.002871973 0.003236632 0.003297310 0.003772118 0.003889675 0.004094820 0.005065790 0.005287149 0.005490366 0.005763587 0.006267317 0.006475185 0.007024402 0.007230039 0.007394389 0.007843995 0.007972917 0.008555355 0.009023057 0.009701639 0.009890607 0.010945009 0.011625628 0.012260160 0.012841925 0.013273833 0.013833101 0.014521426 0.014907438 0.015124152 0.015271959 0.015460053 0.016150125 0.016717928 0.017719068 0.018120291 0.018681953 0.018789286 0.019702331 0.020868344 0.021173550 0.021889605 0.022701119 0.023308941 0.024264264 0.025859809 0.026349864 0.026864161 0.028285087 0.028784252 0.030705158 0.031435419 0.032118927 0.033383662 0.033753250 0.034988960 0.037300580 0.038056532 0.039164350 0.039214937 0.040790109 0.042088940 0.043512409 0.043951012 0.045369455 0.048342334 0.049072875 0.049467989 0.050153030 0.050985356 0.052119858 0.052332472 0.052391459 0.052606513 0.053540225 0.054037754 0.054368035 0.054737036 0.055159329 0.056041500 0.056364503 0.056471832 0.057137865 0.058437883 0.059482770 0.060602597 0.061149246 0.061628334 0.061962540 0.062327404 0.064883587 0.065236355 0.065731648 0.065870936 0.067012397 0.071814087 0.073784141 0.074802122 0.076906086 0.080492180 0.083632995 0.085018648 0.085633016 0.086332254 0.087372448 0.089719037 0.090765709 0.093472341 0.094505671 0.095562920 0.095824741 0.097260166 0.097396016 0.098214031 0.099188466 0.099364411 0.099914267 0.100774435 0.101496807 0.102364387 0.103000818 0.103734431 0.104472921 0.106282789 0.106733702 0.107077472 0.108895643 0.109688110 0.110522145 0.112247437 0.113168775 0.113932265 0.117157402 0.118625009 0.119406903 0.121165251 0.123413331 0.124953605 0.126013058 0.130504435 0.131563412 0.134800334 0.139385396 0.141962723 0.142397278 0.145320553 0.146091428 0.146699502 0.148215481 0.150775767 0.152872278 0.157917554 0.160207558 0.172108961 0.172926331 0.175682662 0.182710819 0.183323114 0.186192479 0.187799365 0.191035425 0.193112873 0.196542534 0.197825225 0.201908161 0.204763656 0.206752141 0.209605970 0.209614640 0.212513441 0.212703565 0.216450069 0.218056070 0.224199484 0.224941292 0.229738938 0.233721494 0.234332475 0.234941417 0.243613154 0.254309195 0.256524519 0.260119242 0.264930383 0.278343583 0.282229587 0.285998428 0.288105418 0.292307466 0.299208641 0.304002757 0.304981681 0.305786884 0.312813034 0.314627081 0.321537579 0.321887708 0.328926124 0.344327136 0.347243188 0.349935126 0.350675367 0.354352619 0.360795355 0.361529987 0.377045743 0.377534813 0.387029441 0.407346173 0.421803027 0.425921415 0.450458840 0.466031732 0.468625532 0.475613947 0.479945650 0.480535622 0.487078986 0.500969785 0.508491521 0.533316570 0.564145044 0.566247518 0.583617669 0.592153148 0.596624459 0.603213874 0.637019481 0.641222199 0.644054341 0.665367088 0.672325297 0.683719712 0.685028979 0.691231155 0.697728227 0.703816440 0.713012992 0.722998400 0.738671512 0.749933545 0.759275551 0.771846991 0.776660886 0.805182458 0.808965341 0.812629217 0.813272370 0.819996768 0.820728249 0.829075920 0.830528913 0.831536948 0.841020029 0.844802525 0.844923228 0.850587961 0.857513796 0.863465551 0.864615944 0.870523414 0.873918111 0.883316941 0.887409475 0.891599740 0.895564406 0.917892257 0.922119430 0.930429550 0.932249067 0.963778061 0.975205000 0.983645853 0.999116141 1.009551563 1.024065839 1.039505242 1.047070681 1.053397685 1.059665231 1.085300066 1.085999640 1.095925189 1.104745036 1.110798473 1.112157711 1.122711242 1.123581193 1.134995079 1.138970036 1.170289343 1.170600034 1.179014853 1.185475993 1.194061434 1.210980324 1.219974289 1.258544795 1.295620357 1.312486521 1.319077419 1.323949100 1.325845091 1.328239140 1.332917198 1.340916264 1.341752455 1.355386023 1.374676663 1.380354843 1.380926533 1.386093258 1.396253501 1.418385659 1.550996964 1.659941002 1.771649326</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">62</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33879504" y3="0.07850286" z3="-0.19411659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3878265" y3="0.16221126" z3="0.41076336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65236385" y3="0.443272" z3="-0.34927003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74576713" y3="1.25156701" z3="-2.27601814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39258001" y3="0.46937221" z3="-1.18838174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74380566" y3="0.86974656" z3="-3.67376288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66047809" y3="1.76711532" z3="-3.15864176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.42384723" y3="2.61761563" z3="-4.65983677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58415409" y3="1.27882494" z3="-4.3962724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.55067794" y3="2.95618507" z3="-5.22620462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92028811" y3="-0.45957422" z3="-3.43382756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0965403" y3="0.10106926" z3="-1.0010004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38999813" y3="-1.04892941" z3="-1.98613956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91956551" y3="-0.90604828" z3="-1.81487345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08479721" y3="-2.37581669" z3="-1.8174496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14882255" y3="-3.63805227" z3="0.68886269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00461167" y3="-5.18784189" z3="-4.75137709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23566686" y3="-4.95058739" z3="-3.70941084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84059273" y3="-4.31238323" z3="-1.07925416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78330568" y3="-4.53579657" z3="-2.8537419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54885933" y3="-5.07258639" z3="-3.25060047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85214218" y3="-4.74915945" z3="-1.9304201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4929132" y3="-4.23076382" z3="-1.52231094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81359512" y3="-4.42999005" z3="-3.20169763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34283916" y3="-5.39083211" z3="-3.92955111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88655268" y3="-4.81425348" z3="-1.5846581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03483138" y3="-3.88473148" z3="0.24747865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17748344" y3="-3.6820413" z3="0.89190049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06194801" y3="-4.14895559" z3="0.45561904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17240757" y3="-3.55643314" z3="2.359849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22695504" y3="-3.39181808" z3="5.15894683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36280956" y3="-3.78905265" z3="3.06426545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00950854" y3="-3.24579204" z3="3.08074413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03400741" y3="-3.16392336" z3="4.46995735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38899456" y3="-3.70934037" z3="4.4539086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27464341" y3="-4.04273684" z3="2.51631617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05465294" y3="-3.08663396" z3="2.57447187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.107733" y3="-2.94045325" z3="5.00719512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32216715" y3="-3.90284272" z3="4.9901234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24554549" y3="-3.33614343" z3="6.25097055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40561231" y3="-3.85970079" z3="-0.61418197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16190599" y3="-3.34384028" z3="-1.06097656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5345829" y3="0.27905986" z3="-4.72142752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09459661" y3="-1.76006698" z3="0.04320207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93327444" y3="-1.01837279" z3="1.21304617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8798206" y3="-0.36102217" z3="1.55965604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.41944645" y3="0.53705491" z3="1.26060143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.5291142" y3="1.46075904" z3="-0.35067163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95365003" y3="-0.70032618" z3="1.40209232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.40846871" y3="1.70369398" z3="2.72621544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.9133084" y3="-1.02772397" z3="2.10518146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.69915516" y3="-0.42327462" z3="3.37103486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.26330342" y3="0.79270672" z3="-1.18757245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.21444251" y3="2.27915856" z3="-0.33174838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.52594287" y3="1.90977062" z3="-0.50643974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00440657" y3="-1.07224079" z3="2.43877806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91615827" y3="-0.22154026" z3="1.15214455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83000293" y3="-1.53883296" z3="0.69796417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44562068" y3="1.14539253" z3="3.67852587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.51833874" y3="2.30564079" z3="2.72540546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.26214486" y3="2.40398699" z3="2.69914127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.83464841" y3="-0.87430782" z3="3.88400084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.61541467" y3="-0.61365623" z3="3.94566659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.5406222" y3="0.66219357" z3="3.26215163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82916764" y3="-0.66603241" z3="0.99255002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42151347" y3="-1.99993429" z3="0.8662482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76728746" y3="-2.64150719" z3="1.91073433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53636748" y3="-1.9353214" z3="3.08753272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99350606" y3="-0.6334798" z3="3.27028368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64850471" y3="-0.00598211" z3="2.21538368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54428961" y3="-2.50892636" z3="-0.09106347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38654136" y3="-3.65729089" z3="1.79674682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67304863" y3="-2.53404115" z3="4.11048109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.79326253" y3="-0.1132196" z3="4.20765754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.97697857" y3="1.03164505" z3="2.32104611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77653762" y3="0.50500893" z3="-4.28182037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76216327" y3="-0.45956938" z3="-4.44719574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42661322" y3="-1.65288867" z3="-5.07595771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14639316" y3="-1.88906595" z3="-5.56838758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83250249" y3="-0.92191714" z3="-5.37999777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01071265" y3="1.43004899" z3="-3.74943178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77566093" y3="-0.30914125" z3="-4.07520492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44430212" y3="-2.6985017" z3="-5.20495521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07624055" y3="-2.83042552" z3="-6.07614479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84981944" y3="-1.11192067" z3="-5.72724031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.31209412" y3="-1.82688243" z3="5.03363975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32666903" y3="-3.68863621" z3="3.95986394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22703029" y3="-3.60541108" z3="-5.98175432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44473718" y3="-2.60550981" z3="-4.5197321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08844238" y3="1.14480776" z3="-1.50614209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13417709" y3="1.54007731" z3="-2.48841416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46321711" y3="1.44478783" z3="-1.70937361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88497989" y3="2.08710698" z3="-2.84760917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1843802" y3="1.14229371" z3="-0.94376517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9459876" y3="2.30659305" z3="-2.99603258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.60636399" y3="2.18519268" z3="-3.66547073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94340908" y3="2.45055909" z3="-3.84013062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88999591" y3="2.46112749" z3="-4.44270952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2837166" y3="2.94021117" z3="-4.75696894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.45188291" y3="3.17031965" z3="-3.38239111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.34466556" y3="3.58543044" z3="-4.17981746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.27509918" y3="4.17932683" z3="-2.80700141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.04707638" y3="5.51160393" z3="-3.05754343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.09788913" y3="3.88956758" z3="-2.15151843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.69589983" y3="6.26578273" z3="-2.60287246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.14305071" y3="4.9703095" z3="-4.43252881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.97855854" y3="5.91636772" z3="-3.89229189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.29767251" y3="5.2698827" z3="-5.0597159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.81245263" y3="6.9789137" z3="-4.09116535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48671757" y3="-2.24738279" z3="-0.28807743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44574399" y3="-3.02880992" z3="-1.06579754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01477751" y3="-2.6469483" z3="0.59280887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10789133" y3="-1.42808281" z3="-0.69699244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18813019" y3="-1.44276226" z3="-1.11986025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33925107" y3="-0.40144018" z3="-1.46124389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11049971" y3="-1.55277634" z3="-0.90944981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41462794" y3="-2.09497109" z3="-1.97759052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3388,.0785,-.1941;7.3878,.1622,.4108;6.6524,.4433,-.3493;4.7458,1.2516,-2.276;4.3926,.4694,-1.1884;2.7438,.8697,-3.6738;3.6605,1.7671,-3.1586;1.4238,2.6176,-4.6598;1.5842,1.2788,-4.3963;.5507,2.9562,-5.2262;2.9203,-.4596,-3.4338;3.0965,.1011,-1.001;2.39,-1.0489,-1.9861;.9196,-.906,-1.8149;3.0848,-2.3758,-1.8174;-.1488,-3.6381,.6889;-.0046,-5.1878,-4.7514;-.2357,-4.9506,-3.7094;-.8406,-4.3124,-1.0793;.7833,-4.5358,-2.8537;-1.5489,-5.0726,-3.2506;-1.8521,-4.7492,-1.9304;.4929,-4.2308,-1.5223;1.8136,-4.43,-3.2017;-2.3428,-5.3908,-3.9296;-2.8866,-4.8143,-1.5847;-1.0348,-3.8847,.2475;-2.1775,-3.682,.8919;-3.0619,-4.149,.4556;-2.1724,-3.5564,2.3598;-2.227,-3.3918,5.1589;-3.3628,-3.7891,3.0643;-1.0095,-3.2458,3.0807;-1.034,-3.1639,4.47;-3.389,-3.7093,4.4539;-4.2746,-4.0427,2.5163;-.0547,-3.0866,2.5745;-.1077,-2.9405,5.0072;-4.3222,-3.9028,4.9901;-2.2455,-3.3361,6.251;1.4056,-3.8597,-.6142;2.1619,-3.3438,-1.061;.5346,.2791,-4.7214;-3.0946,-1.7601,.0432;-2.9333,-1.0184,1.213;-1.8798,-.361,1.5597;-.4194,.5371,1.2606;-.5291,1.4608,-.3507;.9537,-.7003,1.4021;-.4085,1.7037,2.7262;-3.9133,-1.0277,2.1052;-3.6992,-.4233,3.371;-.2633,.7927,-1.1876;.2144,2.2792,-.3317;-1.5259,1.9098,-.5064;1.0044,-1.0722,2.4388;1.9162,-.2215,1.1521;.83,-1.5388,.698;-.4456,1.1454,3.6785;.5183,2.3056,2.7254;-1.2621,2.404,2.6991;-2.8346,-.8743,3.884;-4.6154,-.6137,3.9457;-3.5406,.6622,3.2622;4.8292,-.666,.9926;4.4215,-1.9999,.8662;3.7673,-2.6415,1.9107;3.5364,-1.9353,3.0875;3.9935,-.6335,3.2703;4.6485,-.006,2.2154;4.5443,-2.5089,-.0911;3.3865,-3.6573,1.7967;2.673,-2.534,4.1105;3.7933,-.1132,4.2077;4.977,1.0316,2.321;-.7765,.505,-4.2818;-1.7622,-.4596,-4.4472;-1.4266,-1.6529,-5.076;-.1464,-1.8891,-5.5684;.8325,-.9219,-5.38;-1.0107,1.43,-3.7494;-2.7757,-.3091,-4.0752;-2.4443,-2.6985,-5.205;.0762,-2.8304,-6.0761;1.8498,-1.1119,-5.7272;2.3121,-1.8269,5.0336;2.3267,-3.6886,3.9599;-2.227,-3.6054,-5.9818;-3.4447,-2.6055,-4.5197;7.0884,1.1448,-1.5061;6.1342,1.5401,-2.4884;8.4632,1.4448,-1.7094;8.885,2.0871,-2.8476;9.1844,1.1423,-.9438;9.946,2.3066,-2.996;6.6064,2.1852,-3.6655;7.9434,2.4506,-3.8401;5.89,2.4611,-4.4427;8.2837,2.9402,-4.757;3.4519,3.1703,-3.3824;2.3447,3.5854,-4.1798;4.2751,4.1793,-2.807;4.0471,5.5116,-3.0575;5.0979,3.8896,-2.1515;4.6959,6.2658,-2.6029;2.1431,4.9703,-4.4325;2.9786,5.9164,-3.8923;1.2977,5.2699,-5.0597;2.8125,6.9789,-4.0912;-4.4867,-2.2474,-.2881;-4.4457,-3.0288,-1.0658;-5.0148,-2.6469,.5928;-5.1079,-1.4281,-.697;-2.1881,-1.4428,-1.1199;-2.3393,-.4014,-1.4612;-1.1105,-1.5528,-.9094;-2.4146,-2.095,-1.9776;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650359718049</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006580123731 0.000600370455 0.016911807051 0.005337351340</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030005250 -0.001507471 0.000156706 0.000175988 0.000212986 0.000309254 0.000338370 0.000374554 0.000525951 0.000574537 0.000749987 0.000782877 0.000833639 0.000921335 0.000937619 0.001091604 0.001109187 0.001148602 0.001246853 0.001325939 0.001356535 0.001620834 0.001673037 0.001866604 0.001962121 0.002216140 0.002289082 0.002633344 0.002872152 0.003237091 0.003297305 0.003776317 0.003895594 0.004098071 0.005067648 0.005287613 0.005490747 0.005787540 0.006277030 0.006482916 0.007057714 0.007239095 0.007842837 0.007971371 0.008195836 0.008566136 0.009028157 0.009731547 0.009897916 0.010944676 0.011629406 0.012259395 0.012841924 0.013275444 0.013832777 0.014519587 0.014912866 0.015139991 0.015275757 0.015468501 0.016157713 0.016725077 0.017741522 0.018120555 0.018691340 0.018797519 0.019709004 0.020885982 0.021174343 0.021889473 0.022699536 0.023299984 0.024263995 0.025860066 0.026350193 0.026864179 0.028286173 0.028784239 0.030705139 0.031437186 0.032119843 0.033383869 0.033754080 0.035001841 0.037300514 0.038057408 0.039165146 0.039214789 0.040790168 0.042087452 0.043513856 0.043954988 0.045370474 0.048342996 0.049073656 0.049467779 0.050152912 0.050985554 0.052119855 0.052332471 0.052391437 0.052608128 0.053542260 0.054038820 0.054429520 0.054741194 0.055159853 0.056042550 0.056364393 0.056472342 0.057138150 0.058438213 0.059483723 0.060608043 0.061153843 0.061653244 0.061963696 0.062328217 0.064885272 0.065318170 0.065740039 0.065878727 0.067073425 0.071821543 0.073784107 0.074803978 0.076906436 0.080492853 0.083633046 0.085020374 0.085634307 0.086332355 0.087372315 0.089719411 0.090770976 0.093478589 0.094505903 0.095563196 0.095824811 0.097264494 0.097396112 0.098214138 0.099188476 0.099364786 0.099914736 0.100774380 0.101496535 0.102364283 0.103001455 0.103735041 0.104473042 0.106285838 0.106735065 0.107098598 0.108896108 0.109688263 0.110526422 0.112247459 0.113172844 0.113962032 0.117188691 0.118630074 0.119422762 0.121165838 0.123413938 0.124957799 0.126019037 0.130504445 0.131563904 0.134800569 0.139662589 0.142005185 0.142398021 0.145334422 0.146100684 0.146704914 0.148215931 0.150790396 0.152871178 0.157927510 0.160213954 0.172109273 0.172927595 0.175683110 0.182715924 0.183327397 0.186197994 0.187808441 0.191038960 0.193117992 0.196542910 0.197825868 0.201908637 0.204763850 0.206752144 0.209611691 0.209638963 0.212534980 0.212777980 0.216459754 0.218056774 0.224201642 0.224942363 0.229742642 0.233721643 0.234333260 0.234942808 0.243613936 0.254309100 0.256524517 0.260141946 0.264931280 0.278343541 0.282229586 0.285998441 0.288108040 0.292307621 0.299208194 0.304025735 0.304981895 0.305794920 0.312825196 0.314627336 0.321539282 0.321890098 0.328940629 0.344333511 0.347309438 0.349939263 0.350677542 0.354360276 0.360797779 0.361534928 0.377048367 0.377547328 0.387032680 0.407504885 0.421810483 0.425931454 0.450459164 0.466087556 0.468625588 0.475615360 0.480107760 0.480680523 0.487100735 0.501320185 0.508493463 0.533334843 0.564328609 0.566504725 0.583645199 0.592153929 0.596644946 0.603214332 0.637022437 0.641229656 0.644080324 0.665367059 0.672340097 0.683719774 0.685031540 0.691231602 0.697770796 0.703816461 0.713083867 0.723067128 0.738675031 0.749933646 0.759275575 0.771846998 0.776661251 0.805183476 0.808966059 0.812637574 0.813274592 0.820005487 0.820731313 0.829077957 0.830554590 0.831541678 0.841019996 0.844803182 0.844923220 0.850591362 0.857513788 0.863482155 0.864616253 0.870528414 0.873918129 0.883319764 0.887409541 0.891600967 0.895578056 0.917905141 0.922119933 0.930432030 0.932249176 0.963778806 0.975206328 0.983647687 0.999116205 1.009558889 1.024068324 1.039514299 1.047100389 1.053421677 1.059695512 1.085311889 1.086001761 1.096041102 1.104745930 1.110852464 1.112167770 1.122712263 1.123581842 1.134995609 1.138970165 1.170293317 1.170600502 1.179015538 1.185476786 1.194061928 1.211125897 1.219989559 1.260736388 1.295633003 1.312629493 1.319183392 1.323951393 1.325846604 1.328461706 1.332918679 1.340989042 1.341781571 1.355388937 1.374678092 1.380356535 1.380926862 1.386317655 1.396692017 1.418391040 1.550996928 1.659951891 1.771771087</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">63</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33865927" y3="0.0748196" z3="-0.19385033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38720839" y3="0.16341569" z3="0.41213227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65136861" y3="0.44341338" z3="-0.34792846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74354285" y3="1.24970714" z3="-2.27409772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39187393" y3="0.46466797" z3="-1.1880026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74294869" y3="0.86565438" z3="-3.67353826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65718526" y3="1.76446882" z3="-3.15580899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.41898712" y3="2.61318562" z3="-4.65560644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58269262" y3="1.27343986" z3="-4.39585512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54511981" y3="2.95103245" z3="-5.22138845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92211239" y3="-0.46370664" z3="-3.43560352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09655729" y3="0.09330509" z3="-1.00160906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39148165" y3="-1.05571267" z3="-1.98902769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92077734" y3="-0.91414174" z3="-1.81847741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08677153" y3="-2.38246709" z3="-1.82146056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14865152" y3="-3.63626784" z3="0.68704502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00801084" y3="-5.19501861" z3="-4.7508143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23838504" y3="-4.95581824" z3="-3.7091485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84192882" y3="-4.31179157" z3="-1.080019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78129889" y3="-4.54132138" z3="-2.85435254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55168269" y3="-5.07466643" z3="-3.24987338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8543897" y3="-4.74794259" z3="-1.9303528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49172033" y3="-4.23371687" z3="-1.52332212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8116181" y3="-4.43785488" z3="-3.2025917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3462238" y3="-5.39304179" z3="-3.92804942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8891182" y3="-4.80991521" z3="-1.58446246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0352195" y3="-3.88197333" z3="0.24614914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17739086" y3="-3.6781286" z3="0.89083902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06215581" y3="-4.14400619" z3="0.45481766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17205318" y3="-3.5515273" z3="2.35871914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22698795" y3="-3.38463109" z3="5.15758034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36306221" y3="-3.78061839" z3="3.0630807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00854202" y3="-3.24349301" z3="3.07963912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03324497" y3="-3.16051376" z3="4.46874291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38947687" y3="-3.6997183" z3="4.45260477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27512878" y3="-4.0325315" z3="2.51516512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0532993" y3="-3.08728472" z3="2.57327479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10687091" y3="-2.93890402" z3="5.00612677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32328845" y3="-3.89018643" z3="4.98874047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24577086" y3="-3.32806556" z3="6.24950952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40546303" y3="-3.86345913" z3="-0.6158801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16244939" y3="-3.34950421" z3="-1.06349014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53462502" y3="0.27238303" z3="-4.72312652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09324838" y3="-1.75403899" z3="0.04095663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92937512" y3="-1.0118947" z3="1.21000205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.87502892" y3="-0.35532581" z3="1.55467685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.41149576" y3="0.5385268" z3="1.25591442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.51702291" y3="1.46014053" z3="-0.35677386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9581458" y3="-0.70251631" z3="1.40063606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3998561" y3="1.7072499" z3="2.7196252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90808598" y3="-1.01950813" z3="2.10364643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.69185733" y3="-0.41361674" z3="3.3682295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.25624777" y3="0.78846807" z3="-1.19326344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.23135432" y3="2.2746434" z3="-0.34009907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.51184696" y3="1.91416849" z3="-0.51191586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00647719" y3="-1.07413334" z3="2.43751443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92226004" y3="-0.22629906" z3="1.15205381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83325732" y3="-1.54083729" z3="0.69623667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4377546" y3="1.15085329" z3="3.67289992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.52740525" y3="2.30836134" z3="2.71811759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2528431" y3="2.40805716" z3="2.6908537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.8275423" y3="-0.86468574" z3="3.88106197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60760197" y3="-0.60207935" z3="3.94419848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.5320925" y3="0.67130894" z3="3.25742678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83025604" y3="-0.67111706" z3="0.99240943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42033848" y3="-2.00416676" z3="0.86504729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7670641" y3="-2.64612015" z3="1.90997119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53865242" y3="-1.94101772" z3="3.08781444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99770166" y3="-0.64012303" z3="3.27121716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65252206" y3="-0.01243804" z3="2.21635928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54049187" y3="-2.5119871" z3="-0.09327503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38466802" y3="-3.66115717" z3="1.79543506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67561415" y3="-2.53944503" z3="4.11109319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.79919318" y3="-0.12058186" z3="4.20918985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.98282403" y3="1.02448142" z3="2.32284191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77667969" y3="0.49785993" z3="-4.28335295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76139316" y3="-0.46683453" z3="-4.45073185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42459213" y3="-1.65994623" z3="-5.08105847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14419625" y3="-1.89573885" z3="-5.57165225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83404045" y3="-0.9282347" z3="-5.3811165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01247283" y3="1.42238037" z3="-3.7492266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77592669" y3="-0.31794654" z3="-4.07902148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44406318" y3="-2.70266612" z3="-5.21384555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07546918" y3="-2.83661223" z3="-6.07102392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8518194" y3="-1.11763305" z3="-5.7261769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30647178" y3="-1.83109891" z3="5.02607633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33717166" y3="-3.6945797" z3="3.96841088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23348446" y3="-3.61000766" z3="-5.98765694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44056626" y3="-2.60265287" z3="-4.52905904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08613926" y3="1.14789263" z3="-1.50354456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13123434" y3="1.54226784" z3="-2.48552942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46015289" y3="1.45215039" z3="-1.70564634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88054764" y3="2.09787593" z3="-2.84248224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.18185356" y3="1.150328" z3="-0.94028139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94097157" y3="2.32072578" z3="-2.99001059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.60204078" y3="2.19097496" z3="-3.66117681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9383802" y3="2.46051804" z3="-3.8347359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88518807" y3="2.46633663" z3="-4.43817993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.27765992" y3="2.95294643" z3="-4.75046562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.44501771" y3="3.16796048" z3="-3.3757861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.33699898" y3="3.58256919" z3="-4.17235043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.26572137" y3="4.17738866" z3="-2.79767084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.03476186" y3="5.50964145" z3="-3.04515097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.08910621" y3="3.88778183" z3="-2.14284762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.68191577" y3="6.263921" z3="-2.58874765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.13222304" y3="4.96766427" z3="-4.42174118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.96555885" y3="5.91407634" z3="-3.87922256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.28655701" y3="5.26667988" z3="-5.04880054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.79745014" y3="6.97648726" z3="-4.07599561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48644609" y3="-2.23993045" z3="-0.28808165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44735852" y3="-3.02271661" z3="-1.06452624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01396756" y3="-2.63752606" z3="0.59393249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10733435" y3="-1.42063057" z3="-0.69759485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18739224" y3="-1.43957448" z3="-1.12338761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33658952" y3="-0.39962398" z3="-1.46646385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11104497" y3="-1.55107329" z3="-0.91306344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41418587" y3="-2.09146781" z3="-1.97958379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3387,.0748,-.1939;7.3872,.1634,.4121;6.6514,.4434,-.3479;4.7435,1.2497,-2.2741;4.3919,.4647,-1.188;2.7429,.8657,-3.6735;3.6572,1.7645,-3.1558;1.419,2.6132,-4.6556;1.5827,1.2734,-4.3959;.5451,2.951,-5.2214;2.9221,-.4637,-3.4356;3.0966,.0933,-1.0016;2.3915,-1.0557,-1.989;.9208,-.9141,-1.8185;3.0868,-2.3825,-1.8215;-.1487,-3.6363,.687;-.008,-5.195,-4.7508;-.2384,-4.9558,-3.7091;-.8419,-4.3118,-1.08;.7813,-4.5413,-2.8544;-1.5517,-5.0747,-3.2499;-1.8544,-4.7479,-1.9304;.4917,-4.2337,-1.5233;1.8116,-4.4379,-3.2026;-2.3462,-5.393,-3.928;-2.8891,-4.8099,-1.5845;-1.0352,-3.882,.2461;-2.1774,-3.6781,.8908;-3.0622,-4.144,.4548;-2.1721,-3.5515,2.3587;-2.227,-3.3846,5.1576;-3.3631,-3.7806,3.0631;-1.0085,-3.2435,3.0796;-1.0332,-3.1605,4.4687;-3.3895,-3.6997,4.4526;-4.2751,-4.0325,2.5152;-.0533,-3.0873,2.5733;-.1069,-2.9389,5.0061;-4.3233,-3.8902,4.9887;-2.2458,-3.3281,6.2495;1.4055,-3.8635,-.6159;2.1624,-3.3495,-1.0635;.5346,.2724,-4.7231;-3.0932,-1.754,.041;-2.9294,-1.0119,1.21;-1.875,-.3553,1.5547;-.4115,.5385,1.2559;-.517,1.4601,-.3568;.9581,-.7025,1.4006;-.3999,1.7072,2.7196;-3.9081,-1.0195,2.1036;-3.6919,-.4136,3.3682;-.2562,.7885,-1.1933;.2314,2.2746,-.3401;-1.5118,1.9142,-.5119;1.0065,-1.0741,2.4375;1.9223,-.2263,1.1521;.8333,-1.5408,.6962;-.4378,1.1509,3.6729;.5274,2.3084,2.7181;-1.2528,2.4081,2.6909;-2.8275,-.8647,3.8811;-4.6076,-.6021,3.9442;-3.5321,.6713,3.2574;4.8303,-.6711,.9924;4.4203,-2.0042,.865;3.7671,-2.6461,1.91;3.5387,-1.941,3.0878;3.9977,-.6401,3.2712;4.6525,-.0124,2.2164;4.5405,-2.512,-.0933;3.3847,-3.6612,1.7954;2.6756,-2.5394,4.1111;3.7992,-.1206,4.2092;4.9828,1.0245,2.3228;-.7767,.4979,-4.2834;-1.7614,-.4668,-4.4507;-1.4246,-1.6599,-5.0811;-.1442,-1.8957,-5.5717;.834,-.9282,-5.3811;-1.0125,1.4224,-3.7492;-2.7759,-.3179,-4.079;-2.4441,-2.7027,-5.2138;.0755,-2.8366,-6.071;1.8518,-1.1176,-5.7262;2.3065,-1.8311,5.0261;2.3372,-3.6946,3.9684;-2.2335,-3.61,-5.9877;-3.4406,-2.6027,-4.5291;7.0861,1.1479,-1.5035;6.1312,1.5423,-2.4855;8.4602,1.4522,-1.7056;8.8805,2.0979,-2.8425;9.1819,1.1503,-.9403;9.941,2.3207,-2.99;6.602,2.191,-3.6612;7.9384,2.4605,-3.8347;5.8852,2.4663,-4.4382;8.2777,2.9529,-4.7505;3.445,3.168,-3.3758;2.337,3.5826,-4.1724;4.2657,4.1774,-2.7977;4.0348,5.5096,-3.0452;5.0891,3.8878,-2.1428;4.6819,6.2639,-2.5887;2.1322,4.9677,-4.4217;2.9656,5.9141,-3.8792;1.2866,5.2667,-5.0488;2.7975,6.9765,-4.076;-4.4864,-2.2399,-.2881;-4.4474,-3.0227,-1.0645;-5.014,-2.6375,.5939;-5.1073,-1.4206,-.6976;-2.1874,-1.4396,-1.1234;-2.3366,-.3996,-1.4665;-1.111,-1.5511,-.9131;-2.4142,-2.0915,-1.9796;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650360391779</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006152484816 0.000639469782 0.017660475693 0.005336232617</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030015440 -0.002199377 0.000156622 0.000176051 0.000213516 0.000309267 0.000337773 0.000374865 0.000525885 0.000575248 0.000749968 0.000782970 0.000833721 0.000922009 0.000938736 0.001096384 0.001109981 0.001153096 0.001248942 0.001328892 0.001356707 0.001620861 0.001675471 0.001866769 0.001963476 0.002217587 0.002292210 0.002633299 0.002872272 0.003239089 0.003298565 0.003780693 0.003898610 0.004100263 0.005067796 0.005287788 0.005490866 0.005795981 0.006281326 0.006489387 0.007062223 0.007243784 0.007842373 0.007973655 0.008537545 0.008930670 0.009087064 0.009810963 0.009955483 0.010945401 0.011635292 0.012259252 0.012841893 0.013276574 0.013834210 0.014524606 0.014923104 0.015148947 0.015281366 0.015486312 0.016162439 0.016756553 0.017816260 0.018144284 0.018715677 0.018835089 0.019761536 0.020906883 0.021174738 0.021890665 0.022705554 0.023328909 0.024272903 0.025860073 0.026352906 0.026867902 0.028287651 0.028784522 0.030705128 0.031437414 0.032119781 0.033383871 0.033754468 0.035004423 0.037301478 0.038056849 0.039164627 0.039215855 0.040790313 0.042123660 0.043515942 0.043957767 0.045372290 0.048344784 0.049073506 0.049469177 0.050152843 0.050985582 0.052119947 0.052332471 0.052391409 0.052608529 0.053543963 0.054039594 0.054483225 0.054746944 0.055159869 0.056042555 0.056364269 0.056472846 0.057139218 0.058439871 0.059485245 0.060616270 0.061156846 0.061685019 0.061964478 0.062328326 0.064889808 0.065505035 0.065759635 0.065896840 0.067212887 0.071834320 0.073784226 0.074805973 0.076906941 0.080494725 0.083632977 0.085023418 0.085635865 0.086332352 0.087372535 0.089719296 0.090776546 0.093478901 0.094506157 0.095563380 0.095824786 0.097264103 0.097396440 0.098214555 0.099189197 0.099369697 0.099915151 0.100775098 0.101496941 0.102364613 0.103002136 0.103735847 0.104472998 0.106288520 0.106735015 0.107114409 0.108898230 0.109688287 0.110534769 0.112247721 0.113174714 0.113993634 0.117238333 0.118636710 0.119432819 0.121167804 0.123415216 0.124974814 0.126019061 0.130504706 0.131563050 0.134800570 0.140873042 0.142361745 0.142530501 0.145390289 0.146169352 0.146737774 0.148221686 0.150829642 0.152870135 0.157927086 0.160214430 0.172111766 0.172927883 0.175683934 0.182725087 0.183326862 0.186200919 0.187815102 0.191056559 0.193121888 0.196543957 0.197825890 0.201910203 0.204763723 0.206752183 0.209612072 0.209683061 0.212558972 0.212892792 0.216461936 0.218059695 0.224201884 0.224944718 0.229751689 0.233721620 0.234334799 0.234942946 0.243619258 0.254309103 0.256524634 0.260188486 0.264931121 0.278345489 0.282229602 0.285998642 0.288112775 0.292308187 0.299217898 0.304093815 0.304982511 0.305794874 0.312850249 0.314627523 0.321540071 0.321891087 0.328963720 0.344346335 0.347313706 0.349941169 0.350678608 0.354366643 0.360799781 0.361535781 0.377048303 0.377601186 0.387032533 0.407576834 0.421811397 0.425932611 0.450459205 0.466151796 0.468625697 0.475616257 0.480138512 0.480786347 0.487124293 0.501651110 0.508493379 0.533355976 0.564427314 0.566710101 0.583664335 0.592154848 0.596649762 0.603214975 0.637023663 0.641236165 0.644104672 0.665372438 0.672343695 0.683719871 0.685036931 0.691232266 0.697797994 0.703816536 0.713175288 0.723186376 0.738677872 0.749933778 0.759275857 0.771847015 0.776661593 0.805183601 0.808966078 0.812641728 0.813274582 0.820007409 0.820731412 0.829080471 0.830585671 0.831546049 0.841020285 0.844804366 0.844924567 0.850601482 0.857514034 0.863488701 0.864616818 0.870529116 0.873920339 0.883320312 0.887409829 0.891600915 0.895603322 0.917914803 0.922119985 0.930432211 0.932249436 0.963779845 0.975206949 0.983653482 0.999116217 1.009607893 1.024077823 1.039544888 1.047171031 1.053490179 1.059773070 1.085327566 1.086007540 1.096238159 1.104745898 1.110916667 1.112179274 1.122713193 1.123582371 1.134995819 1.138970359 1.170294124 1.170600494 1.179015699 1.185479475 1.194062056 1.211266971 1.220002264 1.262388563 1.295635612 1.312854912 1.319535235 1.323958566 1.325847186 1.328607932 1.332925731 1.341058810 1.341797268 1.355388965 1.374678535 1.380356944 1.380927635 1.386759348 1.398502614 1.418400917 1.550997132 1.659953425 1.771924990</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">64</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33869808" y3="0.07169192" z3="-0.19341233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38667091" y3="0.16474109" z3="0.4136079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65052558" y3="0.44366825" z3="-0.34654663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74155414" y3="1.24753001" z3="-2.27248371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39139379" y3="0.46027271" z3="-1.18761653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74147813" y3="0.86223429" z3="-3.67222807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6542159" y3="1.76150847" z3="-3.15336527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.41471859" y3="2.60862655" z3="-4.65163966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58032101" y3="1.26942246" z3="-4.3933483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54030098" y3="2.94578529" z3="-5.21696114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92313384" y3="-0.4672854" z3="-3.43672207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09686427" y3="0.086134" z3="-1.00202559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39318706" y3="-1.06228462" z3="-1.9911668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92235394" y3="-0.92202147" z3="-1.82053987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08935605" y3="-2.3886976" z3="-1.82512787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14878551" y3="-3.63314682" z3="0.68505582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01061986" y3="-5.20279377" z3="-4.75034174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24053742" y3="-4.96117147" z3="-3.70908734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84271951" y3="-4.31104165" z3="-1.08091214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78023303" y3="-4.54781007" z3="-2.85473159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55417275" y3="-5.07593658" z3="-3.24971244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85610579" y3="-4.74623162" z3="-1.93070077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49122099" y3="-4.2371526" z3="-1.52432168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81092855" y3="-4.44738737" z3="-3.20304545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3500179" y3="-5.39283318" z3="-3.9275357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89099916" y3="-4.80509773" z3="-1.58493222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03547289" y3="-3.87849803" z3="0.24446896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17774687" y3="-3.67228263" z3="0.88889487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06284431" y3="-4.13862721" z3="0.45371114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17215072" y3="-3.54566631" z3="2.35699089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22726481" y3="-3.3774613" z3="5.15601281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36369355" y3="-3.77187476" z3="3.06127444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00798694" y3="-3.2406503" z3="3.07821326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03284391" y3="-3.15687066" z3="4.4673397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39026897" y3="-3.690208" z3="4.45079061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27625948" y3="-4.02203965" z3="2.51329081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05185356" y3="-3.08795516" z3="2.57242673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10575216" y3="-2.93793878" z3="5.0049271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32449819" y3="-3.8785071" z3="4.98675374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24627982" y3="-3.32010242" z3="6.24791441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40599668" y3="-3.86765638" z3="-0.61743996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16352614" y3="-3.35574025" z3="-1.06572045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53329086" y3="0.26805091" z3="-4.72181551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09111597" y3="-1.75040572" z3="0.03930682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92553871" y3="-1.00606099" z3="1.20694109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86983066" y3="-0.3505425" z3="1.54918285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.40458147" y3="0.53977661" z3="1.25091132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.50590721" y3="1.45887974" z3="-0.36341753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96169924" y3="-0.70435427" z3="1.39925831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.39100978" y3="1.71119384" z3="2.71273937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90361527" y3="-1.01047828" z3="2.10100984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.68479917" y3="-0.40408634" z3="3.36516687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.24786247" y3="0.78531182" z3="-1.19844547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.24645165" y3="2.26955724" z3="-0.34823834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.49837888" y3="1.91783062" z3="-0.51931206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0073507" y3="-1.07599631" z3="2.43627624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92743769" y3="-0.23073823" z3="1.1521865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83610375" y3="-1.54251152" z3="0.6948871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43264438" y3="1.15625578" z3="3.6669016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54015148" y3="2.30789143" z3="2.71116169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.24089896" y3="2.41711931" z3="2.68199611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.82037896" y3="-0.85676993" z3="3.87700387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60018453" y3="-0.59056735" z3="3.94234654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.52330321" y3="0.68057834" z3="3.25349033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83142698" y3="-0.67548125" z3="0.99252255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41947483" y3="-2.0078398" z3="0.86405211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76635113" y3="-2.65006898" z3="1.90883658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54055288" y3="-1.94614325" z3="3.08797081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00231011" y3="-0.64628189" z3="3.27276848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65646391" y3="-0.01819628" z3="2.21766063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53761991" y3="-2.5146948" z3="-0.09500332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38221454" y3="-3.66438466" z3="1.79340486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67759413" y3="-2.5445628" z3="4.1114149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8061171" y3="-0.1277394" z3="4.21192394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.98823486" y3="1.01816983" z3="2.32492129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77856401" y3="0.49331148" z3="-4.28559123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76366856" y3="-0.47039301" z3="-4.45395181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42656176" y3="-1.66264699" z3="-5.0821042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1453537" y3="-1.89887773" z3="-5.57050149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83291525" y3="-0.93234573" z3="-5.37956304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01399139" y3="1.41739458" z3="-3.75175716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77798918" y3="-0.32093757" z3="-4.08374787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44345266" y3="-2.7092453" z3="-5.21505742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07840371" y3="-2.84012973" z3="-6.07683517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85076074" y3="-1.12217676" z3="-5.72386469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.32157586" y3="-1.83898665" z3="5.03692871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32634196" y3="-3.69707843" z3="3.9586393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2217487" y3="-3.61623649" z3="-5.99169076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44872024" y3="-2.62031334" z3="-4.53322156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08403434" y3="1.15067495" z3="-1.50105799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1285411" y3="1.54398925" z3="-2.48288744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45728458" y3="1.45908169" z3="-1.70200686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87638336" y3="2.10799876" z3="-2.83749319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17947404" y3="1.15803329" z3="-0.93680095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.93623409" y3="2.33417238" z3="-2.98408804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59804188" y3="2.19607316" z3="-3.65715928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.93368778" y3="2.46977897" z3="-3.82956178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88073557" y3="2.47088818" z3="-4.43393707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.27200331" y3="2.96491707" z3="-4.74419036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.43933828" y3="3.16479281" z3="-3.37058743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.33071233" y3="3.5785516" z3="-4.16668857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.25723222" y3="4.17494431" z3="-2.78946576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.02285671" y3="5.50740004" z3="-3.0333875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.08087491" y3="3.88590469" z3="-2.13473967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.66767321" y3="6.26242108" z3="-2.57439593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.12240332" y3="4.96386287" z3="-4.41244203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.95289878" y3="5.91128794" z3="-3.86676814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.27582382" y3="5.26261408" z3="-5.03843874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.78166841" y3="6.97413437" z3="-4.0602323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48554999" y3="-2.23370838" z3="-0.28828483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44864933" y3="-3.01762748" z3="-1.06370722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0136604" y3="-2.62875914" z3="0.5944431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10456825" y3="-1.41332667" z3="-0.69855939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1865514" y3="-1.43771659" z3="-1.12659324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33295742" y3="-0.39604917" z3="-1.4679734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10927262" y3="-1.55377977" z3="-0.91922371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41857631" y3="-2.08858119" z3="-1.98351135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3387,.0717,-.1934;7.3867,.1647,.4136;6.6505,.4437,-.3465;4.7416,1.2475,-2.2725;4.3914,.4603,-1.1876;2.7415,.8622,-3.6722;3.6542,1.7615,-3.1534;1.4147,2.6086,-4.6516;1.5803,1.2694,-4.3933;.5403,2.9458,-5.217;2.9231,-.4673,-3.4367;3.0969,.0861,-1.002;2.3932,-1.0623,-1.9912;.9224,-.922,-1.8205;3.0894,-2.3887,-1.8251;-.1488,-3.6331,.6851;-.0106,-5.2028,-4.7503;-.2405,-4.9612,-3.7091;-.8427,-4.311,-1.0809;.7802,-4.5478,-2.8547;-1.5542,-5.0759,-3.2497;-1.8561,-4.7462,-1.9307;.4912,-4.2372,-1.5243;1.8109,-4.4474,-3.203;-2.35,-5.3928,-3.9275;-2.891,-4.8051,-1.5849;-1.0355,-3.8785,.2445;-2.1777,-3.6723,.8889;-3.0628,-4.1386,.4537;-2.1722,-3.5457,2.357;-2.2273,-3.3775,5.156;-3.3637,-3.7719,3.0613;-1.008,-3.2407,3.0782;-1.0328,-3.1569,4.4673;-3.3903,-3.6902,4.4508;-4.2763,-4.022,2.5133;-.0519,-3.088,2.5724;-.1058,-2.9379,5.0049;-4.3245,-3.8785,4.9868;-2.2463,-3.3201,6.2479;1.406,-3.8677,-.6174;2.1635,-3.3557,-1.0657;.5333,.2681,-4.7218;-3.0911,-1.7504,.0393;-2.9255,-1.0061,1.2069;-1.8698,-.3505,1.5492;-.4046,.5398,1.2509;-.5059,1.4589,-.3634;.9617,-.7044,1.3993;-.391,1.7112,2.7127;-3.9036,-1.0105,2.101;-3.6848,-.4041,3.3652;-.2479,.7853,-1.1984;.2465,2.2696,-.3482;-1.4984,1.9178,-.5193;1.0074,-1.076,2.4363;1.9274,-.2307,1.1522;.8361,-1.5425,.6949;-.4326,1.1563,3.6669;.5402,2.3079,2.7112;-1.2409,2.4171,2.682;-2.8204,-.8568,3.877;-4.6002,-.5906,3.9423;-3.5233,.6806,3.2535;4.8314,-.6755,.9925;4.4195,-2.0078,.8641;3.7664,-2.6501,1.9088;3.5406,-1.9461,3.088;4.0023,-.6463,3.2728;4.6565,-.0182,2.2177;4.5376,-2.5147,-.095;3.3822,-3.6644,1.7934;2.6776,-2.5446,4.1114;3.8061,-.1277,4.2119;4.9882,1.0182,2.3249;-.7786,.4933,-4.2856;-1.7637,-.4704,-4.454;-1.4266,-1.6626,-5.0821;-.1454,-1.8989,-5.5705;.8329,-.9323,-5.3796;-1.014,1.4174,-3.7518;-2.778,-.3209,-4.0837;-2.4435,-2.7092,-5.2151;.0784,-2.8401,-6.0768;1.8508,-1.1222,-5.7239;2.3216,-1.839,5.0369;2.3263,-3.6971,3.9586;-2.2217,-3.6162,-5.9917;-3.4487,-2.6203,-4.5332;7.084,1.1507,-1.5011;6.1285,1.544,-2.4829;8.4573,1.4591,-1.702;8.8764,2.108,-2.8375;9.1795,1.158,-.9368;9.9362,2.3342,-2.9841;6.598,2.1961,-3.6572;7.9337,2.4698,-3.8296;5.8807,2.4709,-4.4339;8.272,2.9649,-4.7442;3.4393,3.1648,-3.3706;2.3307,3.5786,-4.1667;4.2572,4.1749,-2.7895;4.0229,5.5074,-3.0334;5.0809,3.8859,-2.1347;4.6677,6.2624,-2.5744;2.1224,4.9639,-4.4124;2.9529,5.9113,-3.8668;1.2758,5.2626,-5.0384;2.7817,6.9741,-4.0602;-4.4855,-2.2337,-.2883;-4.4486,-3.0176,-1.0637;-5.0137,-2.6288,.5944;-5.1046,-1.4133,-.6986;-2.1866,-1.4377,-1.1266;-2.333,-.396,-1.468;-1.1093,-1.5538,-.9192;-2.4186,-2.0886,-1.9835;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650366374375</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010613752184 0.000803507220 0.016043679566 0.005338452223</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030055734 -0.002375616 0.000157143 0.000176043 0.000213416 0.000310137 0.000337760 0.000375021 0.000525842 0.000575188 0.000752504 0.000783742 0.000833898 0.000923224 0.000939535 0.001098977 0.001118521 0.001153875 0.001250098 0.001329550 0.001357993 0.001621205 0.001675399 0.001869527 0.001964017 0.002219989 0.002294109 0.002633472 0.002872319 0.003241199 0.003299912 0.003781331 0.003898362 0.004099899 0.005067863 0.005287792 0.005491420 0.005796375 0.006280979 0.006492809 0.007062650 0.007253824 0.007843603 0.007975713 0.008558425 0.008995400 0.009231516 0.009842141 0.010030474 0.010947205 0.011635301 0.012259211 0.012842498 0.013276354 0.013838918 0.014551501 0.014937196 0.015148556 0.015281495 0.015498684 0.016162143 0.016782799 0.017879507 0.018186018 0.018734474 0.018866193 0.019845856 0.020913006 0.021196848 0.021902122 0.022734058 0.023472501 0.024294300 0.025860289 0.026356126 0.026876081 0.028287864 0.028785078 0.030705474 0.031437383 0.032121560 0.033383957 0.033754307 0.035004236 0.037304823 0.038056693 0.039166550 0.039224824 0.040791882 0.042220354 0.043516119 0.043957423 0.045374297 0.048345250 0.049074708 0.049471781 0.050153105 0.050985537 0.052120162 0.052332464 0.052391378 0.052608502 0.053544788 0.054040074 0.054499985 0.054749597 0.055159885 0.056042432 0.056364153 0.056473124 0.057139847 0.058441070 0.059485976 0.060621983 0.061157527 0.061708582 0.061964863 0.062328565 0.064893829 0.065643147 0.065787981 0.065927284 0.067359919 0.071845338 0.073784551 0.074807907 0.076907219 0.080498300 0.083633254 0.085023716 0.085638914 0.086332412 0.087374396 0.089719216 0.090777628 0.093478861 0.094506342 0.095563327 0.095824885 0.097264455 0.097396679 0.098215092 0.099191410 0.099379920 0.099915245 0.100776264 0.101498146 0.102365495 0.103003203 0.103735574 0.104473856 0.106288556 0.106735041 0.107115865 0.108901217 0.109688457 0.110543392 0.112248535 0.113175006 0.114013219 0.117274588 0.118641031 0.119432470 0.121169585 0.123414786 0.124998547 0.126018800 0.130504854 0.131562388 0.134800790 0.141436582 0.142387761 0.144003077 0.145518330 0.146379252 0.146959908 0.148249560 0.150911772 0.152870891 0.157958799 0.160214627 0.172117365 0.172928312 0.175684445 0.182732633 0.183333018 0.186200646 0.187814687 0.191074081 0.193123880 0.196545249 0.197826069 0.201921432 0.204767099 0.206752346 0.209612188 0.209716607 0.212584285 0.212962689 0.216462608 0.218067094 0.224202051 0.224946167 0.229762410 0.233721635 0.234337420 0.234942932 0.243625332 0.254309053 0.256525075 0.260215384 0.264932206 0.278347754 0.282229729 0.285998700 0.288121224 0.292313751 0.299241351 0.304164534 0.304985292 0.305796361 0.312888724 0.314627642 0.321540014 0.321906723 0.328993565 0.344374765 0.347319533 0.349941637 0.350689939 0.354372656 0.360801675 0.361535739 0.377048988 0.377652514 0.387061005 0.407582044 0.421811378 0.425932724 0.450459932 0.466207202 0.468627649 0.475617093 0.480153263 0.480850857 0.487148072 0.501777538 0.508496744 0.533368590 0.564502610 0.566893359 0.583732111 0.592154946 0.596655017 0.603216956 0.637025351 0.641251327 0.644142069 0.665394047 0.672344815 0.683719912 0.685039485 0.691232300 0.697814818 0.703816677 0.713277314 0.723270498 0.738677899 0.749933790 0.759277088 0.771847036 0.776661640 0.805184822 0.808968552 0.812643268 0.813281830 0.820007598 0.820734113 0.829080784 0.830632644 0.831547063 0.841022341 0.844809067 0.844928311 0.850618772 0.857514187 0.863492159 0.864617883 0.870531610 0.873922108 0.883320385 0.887410795 0.891601288 0.895647625 0.917920254 0.922120220 0.930432180 0.932250362 0.963779851 0.975207262 0.983664736 0.999116211 1.009700412 1.024094002 1.039583324 1.047246734 1.053575696 1.059867799 1.085337718 1.086014996 1.096382971 1.104746048 1.110940135 1.112184057 1.122713380 1.123582394 1.134995848 1.138972238 1.170294490 1.170601470 1.179015893 1.185484330 1.194062215 1.211318106 1.220013989 1.263618599 1.295636232 1.313104610 1.320376898 1.323959780 1.325847805 1.328720859 1.332930609 1.341107793 1.341809062 1.355389252 1.374678559 1.380359069 1.380928055 1.387203276 1.403207009 1.418409601 1.550997852 1.659953167 1.771995647</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">65</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3386036" y3="0.06851398" z3="-0.19278788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38608332" y3="0.16658284" z3="0.41527401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64952293" y3="0.44423669" z3="-0.3449618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73914463" y3="1.24554391" z3="-2.27061781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39066746" y3="0.45570637" z3="-1.18702245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73931508" y3="0.85896099" z3="-3.67085302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65050186" y3="1.75905508" z3="-3.15026358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40871682" y3="2.60543641" z3="-4.64571371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57703428" y3="1.26549109" z3="-4.39075754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.53372599" y3="2.94220206" z3="-5.21030784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92363365" y3="-0.47067709" z3="-3.43776668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09695183" y3="0.07853886" z3="-1.00208829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39436997" y3="-1.06887817" z3="-1.99323159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92339958" y3="-0.93023833" z3="-1.82248103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09126334" y3="-2.39518014" z3="-1.82899683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14814728" y3="-3.6308108" z3="0.68272651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01274462" y3="-5.20982478" z3="-4.74994855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24235416" y3="-4.96587203" z3="-3.70922511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8434594" y3="-4.31030764" z3="-1.08232694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77912718" y3="-4.55394971" z3="-2.8552541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55650488" y3="-5.07630063" z3="-3.2501784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8579052" y3="-4.74377227" z3="-1.93187787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49065956" y3="-4.24052112" z3="-1.52537676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81031986" y3="-4.45725107" z3="-3.20321792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35235658" y3="-5.39280909" z3="-3.92760273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89300444" y3="-4.79941444" z3="-1.58639934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03537446" y3="-3.87569098" z3="0.24265279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17645046" y3="-3.6700099" z3="0.88808364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06287139" y3="-4.13331925" z3="0.45199962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17153298" y3="-3.54090019" z3="2.35542576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22729639" y3="-3.37034521" z3="5.15407258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36468016" y3="-3.76199467" z3="3.05922015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00658767" y3="-3.23903256" z3="3.07675337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03171499" y3="-3.15420909" z3="4.46575927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39147669" y3="-3.67929036" z3="4.44862271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27823307" y3="-4.00881664" z3="2.51090349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04984592" y3="-3.08988388" z3="2.57107817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10418086" y3="-2.93793473" z3="5.00357933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32690368" y3="-3.86361947" z3="4.98433713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24636303" y3="-3.31241422" z3="6.24596317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40655653" y3="-3.87233545" z3="-0.61903861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16455471" y3="-3.36194332" z3="-1.06808316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53124496" y3="0.26317242" z3="-4.72116575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09084528" y3="-1.74294083" z3="0.03589506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92163727" y3="-0.99932935" z3="1.20304154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86412242" y3="-0.34555442" z3="1.54398996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.39676341" y3="0.54101956" z3="1.24552744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.49417502" y3="1.4580056" z3="-0.37019345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96618969" y3="-0.70611499" z3="1.39787921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38199794" y3="1.71498192" z3="2.7052002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89868113" y3="-1.00131699" z3="2.0988749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67687659" y3="-0.39431374" z3="3.36200876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.24036753" y3="0.78144177" z3="-1.20451491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.26249533" y3="2.2647281" z3="-0.3565824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.48432857" y3="1.92166002" z3="-0.52651293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00846396" y3="-1.0772896" z3="2.43518408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9331781" y3="-0.2344332" z3="1.15279994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84037907" y3="-1.54411241" z3="0.69348235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42494509" y3="1.16227034" z3="3.66041194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54729829" y3="2.31182195" z3="2.70385571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23144388" y3="2.41908327" z3="2.67190243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81320719" y3="-0.8484858" z3="3.87349707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5921634" y3="-0.57790245" z3="3.94040614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51270701" y3="0.68996342" z3="3.24948027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83266048" y3="-0.68007127" z3="0.99278104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41806004" y3="-2.0115465" z3="0.86263529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76523933" y3="-2.65427068" z3="1.90730587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54244041" y3="-1.95182991" z3="3.08796631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00717804" y3="-0.65322365" z3="3.27438357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66105676" y3="-0.02455512" z3="2.21945249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53365151" y3="-2.51698434" z3="-0.09764441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37884344" y3="-3.66764195" z3="1.79055469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67964306" y3="-2.55004266" z3="4.11165011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81347549" y3="-0.13588082" z3="4.21472593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99497787" y3="1.01108367" z3="2.32813439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78223948" y3="0.48629154" z3="-4.28498194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76550633" y3="-0.48012875" z3="-4.45629412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42526912" y3="-1.67288445" z3="-5.08600771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14269238" y3="-1.90590087" z3="-5.57464305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83393338" y3="-0.93652461" z3="-5.38075972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02049228" y3="1.41035021" z3="-3.75232097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78102828" y3="-0.33170395" z3="-4.08805956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44241486" y3="-2.71716002" z3="-5.2181885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08077541" y3="-2.84623645" z3="-6.0767546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85317837" y3="-1.12390986" z3="-5.72448493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.32360948" y3="-1.84563346" z3="5.03548795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32851731" y3="-3.70096761" z3="3.96070886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22883614" y3="-3.62381262" z3="-5.99149328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43906558" y3="-2.61796943" z3="-4.53510776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08161784" y3="1.15371176" z3="-1.49846847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12545021" y3="1.54584782" z3="-2.48014174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45409554" y3="1.46618993" z3="-1.69826323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87190494" y3="2.1181333" z3="-2.83245917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17674137" y3="1.1659586" z3="-0.93316374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.93117196" y3="2.34758703" z3="-2.97810791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59368956" y3="2.20108505" z3="-3.65311778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92863728" y3="2.47886354" z3="-3.82436971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87597755" y3="2.47514919" z3="-4.42979586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26598894" y3="2.97652543" z3="-4.73795109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.43255431" y3="3.16252713" z3="-3.3640067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.32292997" y3="3.57607265" z3="-4.1588108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2484258" y3="4.17276489" z3="-2.78067892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.01126427" y3="5.50509561" z3="-3.02149279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.07274505" y3="3.88383111" z3="-2.12675285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.65436427" y3="6.260172" z3="-2.56060733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.11212253" y3="4.96112083" z3="-4.40193232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.94070206" y3="5.90863481" z3="-3.85422442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.26528947" y3="5.25915581" z3="-5.0278578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.76762078" y3="6.97114474" z3="-4.04562877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48566385" y3="-2.22637702" z3="-0.28885603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45027134" y3="-3.01214214" z3="-1.06246121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01293348" y3="-2.61915819" z3="0.59556013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10461259" y3="-1.40681268" z3="-0.7005142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18551417" y3="-1.43494313" z3="-1.13028979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32645325" y3="-0.39269621" z3="-1.47163618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10907784" y3="-1.55587195" z3="-0.92329293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42095132" y3="-2.08482548" z3="-1.9863033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3386,.0685,-.1928;7.3861,.1666,.4153;6.6495,.4442,-.345;4.7391,1.2455,-2.2706;4.3907,.4557,-1.187;2.7393,.859,-3.6709;3.6505,1.7591,-3.1503;1.4087,2.6054,-4.6457;1.577,1.2655,-4.3908;.5337,2.9422,-5.2103;2.9236,-.4707,-3.4378;3.097,.0785,-1.0021;2.3944,-1.0689,-1.9932;.9234,-.9302,-1.8225;3.0913,-2.3952,-1.829;-.1481,-3.6308,.6827;-.0127,-5.2098,-4.7499;-.2424,-4.9659,-3.7092;-.8435,-4.3103,-1.0823;.7791,-4.5539,-2.8553;-1.5565,-5.0763,-3.2502;-1.8579,-4.7438,-1.9319;.4907,-4.2405,-1.5254;1.8103,-4.4573,-3.2032;-2.3524,-5.3928,-3.9276;-2.893,-4.7994,-1.5864;-1.0354,-3.8757,.2427;-2.1765,-3.67,.8881;-3.0629,-4.1333,.452;-2.1715,-3.5409,2.3554;-2.2273,-3.3703,5.1541;-3.3647,-3.762,3.0592;-1.0066,-3.239,3.0768;-1.0317,-3.1542,4.4658;-3.3915,-3.6793,4.4486;-4.2782,-4.0088,2.5109;-.0498,-3.0899,2.5711;-.1042,-2.9379,5.0036;-4.3269,-3.8636,4.9843;-2.2464,-3.3124,6.246;1.4066,-3.8723,-.619;2.1646,-3.3619,-1.0681;.5312,.2632,-4.7212;-3.0908,-1.7429,.0359;-2.9216,-.9993,1.203;-1.8641,-.3456,1.544;-.3968,.541,1.2455;-.4942,1.458,-.3702;.9662,-.7061,1.3979;-.382,1.715,2.7052;-3.8987,-1.0013,2.0989;-3.6769,-.3943,3.362;-.2404,.7814,-1.2045;.2625,2.2647,-.3566;-1.4843,1.9217,-.5265;1.0085,-1.0773,2.4352;1.9332,-.2344,1.1528;.8404,-1.5441,.6935;-.4249,1.1623,3.6604;.5473,2.3118,2.7039;-1.2314,2.4191,2.6719;-2.8132,-.8485,3.8735;-4.5922,-.5779,3.9404;-3.5127,.69,3.2495;4.8327,-.6801,.9928;4.4181,-2.0115,.8626;3.7652,-2.6543,1.9073;3.5424,-1.9518,3.088;4.0072,-.6532,3.2744;4.6611,-.0246,2.2195;4.5337,-2.517,-.0976;3.3788,-3.6676,1.7906;2.6796,-2.55,4.1117;3.8135,-.1359,4.2147;4.995,1.0111,2.3281;-.7822,.4863,-4.285;-1.7655,-.4801,-4.4563;-1.4253,-1.6729,-5.086;-.1427,-1.9059,-5.5746;.8339,-.9365,-5.3808;-1.0205,1.4104,-3.7523;-2.781,-.3317,-4.0881;-2.4424,-2.7172,-5.2182;.0808,-2.8462,-6.0768;1.8532,-1.1239,-5.7245;2.3236,-1.8456,5.0355;2.3285,-3.701,3.9607;-2.2288,-3.6238,-5.9915;-3.4391,-2.618,-4.5351;7.0816,1.1537,-1.4985;6.1255,1.5458,-2.4801;8.4541,1.4662,-1.6983;8.8719,2.1181,-2.8325;9.1767,1.166,-.9332;9.9312,2.3476,-2.9781;6.5937,2.2011,-3.6531;7.9286,2.4789,-3.8244;5.876,2.4751,-4.4298;8.266,2.9765,-4.738;3.4326,3.1625,-3.364;2.3229,3.5761,-4.1588;4.2484,4.1728,-2.7807;4.0113,5.5051,-3.0215;5.0727,3.8838,-2.1268;4.6544,6.2602,-2.5606;2.1121,4.9611,-4.4019;2.9407,5.9086,-3.8542;1.2653,5.2592,-5.0279;2.7676,6.9711,-4.0456;-4.4857,-2.2264,-.2889;-4.4503,-3.0121,-1.0625;-5.0129,-2.6192,.5956;-5.1046,-1.4068,-.7005;-2.1855,-1.4349,-1.1303;-2.3265,-.3927,-1.4716;-1.1091,-1.5559,-.9233;-2.421,-2.0848,-1.9863;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650378286487</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010229244392 0.000725038330 0.016323496446 0.005337230426</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030125945 -0.002219528 0.000157132 0.000176327 0.000213449 0.000310882 0.000337758 0.000376461 0.000525828 0.000575506 0.000755333 0.000784111 0.000834307 0.000923577 0.000941615 0.001099408 0.001124252 0.001154297 0.001250526 0.001330740 0.001360516 0.001621507 0.001677083 0.001873169 0.001964234 0.002226600 0.002309757 0.002634550 0.002872652 0.003242781 0.003301253 0.003781257 0.003900799 0.004100870 0.005068756 0.005289330 0.005491802 0.005821605 0.006280971 0.006493673 0.007063379 0.007266321 0.007845517 0.007978204 0.008598638 0.009012115 0.009328154 0.009852388 0.010052922 0.010947969 0.011635278 0.012259007 0.012844462 0.013279228 0.013843589 0.014583814 0.014953260 0.015148559 0.015282780 0.015501900 0.016162021 0.016786521 0.017911540 0.018205046 0.018750103 0.018872634 0.019889028 0.020913423 0.021231693 0.021921854 0.022761476 0.023655769 0.024319997 0.025860991 0.026356978 0.026885667 0.028287808 0.028785426 0.030705804 0.031438877 0.032128231 0.033385842 0.033755313 0.035010944 0.037308204 0.038056986 0.039171491 0.039246119 0.040793399 0.042540523 0.043524915 0.043957382 0.045379212 0.048345277 0.049078282 0.049472668 0.050153706 0.050985582 0.052120193 0.052332463 0.052391355 0.052609517 0.053544253 0.054040033 0.054498012 0.054749189 0.055159891 0.056042391 0.056364041 0.056473013 0.057139731 0.058442112 0.059486650 0.060627225 0.061157457 0.061733744 0.061965725 0.062330129 0.064897619 0.065697765 0.065822154 0.065957420 0.067466129 0.071856859 0.073785651 0.074810485 0.076907290 0.080507503 0.083633907 0.085023724 0.085647785 0.086333116 0.087378745 0.089719360 0.090777828 0.093485257 0.094506390 0.095563545 0.095824941 0.097270437 0.097396698 0.098215513 0.099195048 0.099391202 0.099915250 0.100776755 0.101499299 0.102367424 0.103003082 0.103735826 0.104475316 0.106289990 0.106734983 0.107115782 0.108907072 0.109689649 0.110550264 0.112248746 0.113175028 0.114024484 0.117292837 0.118640947 0.119435908 0.121169556 0.123414644 0.125025739 0.126019002 0.130505550 0.131564150 0.134801923 0.141577345 0.142389765 0.144882246 0.145702305 0.146525121 0.147883016 0.148549628 0.151067018 0.152878886 0.158089419 0.160218777 0.172125880 0.172928632 0.175684597 0.182736487 0.183354614 0.186205868 0.187814876 0.191079242 0.193123092 0.196547953 0.197826357 0.201932639 0.204771278 0.206752585 0.209612373 0.209732548 0.212625798 0.212971592 0.216462828 0.218078409 0.224202089 0.224946131 0.229771669 0.233721625 0.234340231 0.234943542 0.243628190 0.254309113 0.256525312 0.260216339 0.264943377 0.278348183 0.282229734 0.285998723 0.288138952 0.292329195 0.299271539 0.304210566 0.304987527 0.305803547 0.312933007 0.314627793 0.321541248 0.321951392 0.329031244 0.344409188 0.347398295 0.349944750 0.350717141 0.354375499 0.360801543 0.361538969 0.377049397 0.377701131 0.387182427 0.407604697 0.421813786 0.425936098 0.450463567 0.466240431 0.468629603 0.475617722 0.480161495 0.480853315 0.487151079 0.501779144 0.508510310 0.533372209 0.564538864 0.566988028 0.583830317 0.592154963 0.596674688 0.603218654 0.637025328 0.641267459 0.644176665 0.665439358 0.672355080 0.683720071 0.685044094 0.691232397 0.697814479 0.703816758 0.713351291 0.723313692 0.738678347 0.749933798 0.759277622 0.771847071 0.776661651 0.805193622 0.808977196 0.812643327 0.813301520 0.820011391 0.820748099 0.829082718 0.830675787 0.831547114 0.841030520 0.844817429 0.844934399 0.850628032 0.857514198 0.863492034 0.864618980 0.870546973 0.873922300 0.883321247 0.887411193 0.891602322 0.895704895 0.917920245 0.922121730 0.930433904 0.932253357 0.963781465 0.975207326 0.983681852 0.999116654 1.009863737 1.024120222 1.039632111 1.047314982 1.053675381 1.059971281 1.085340393 1.086026978 1.096465420 1.104747716 1.110940585 1.112184237 1.122713446 1.123582589 1.134995902 1.138974922 1.170301693 1.170605621 1.179017722 1.185487511 1.194062341 1.211317396 1.220018833 1.264125583 1.295637194 1.313268412 1.321303073 1.323959615 1.325856400 1.328783097 1.332935946 1.341144697 1.341809119 1.355394528 1.374678487 1.380359325 1.380927960 1.387444084 1.408960960 1.418414134 1.550998105 1.659953191 1.772044702</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">66</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33843616" y3="0.0653907" z3="-0.19229627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38533514" y3="0.1683469" z3="0.41685845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64844232" y3="0.44476222" z3="-0.34349677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73693882" y3="1.2434238" z3="-2.26887349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38996223" y3="0.45135302" z3="-1.18653236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73820848" y3="0.85469684" z3="-3.67032803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64735149" y3="1.75591931" z3="-3.14781163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40422993" y3="2.60005631" z3="-4.64194541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5752622" y3="1.25997381" z3="-4.3897981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52817784" y3="2.93632826" z3="-5.20530053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92501701" y3="-0.47494861" z3="-3.43917983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09697587" y3="0.07130289" z3="-1.00258371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39614648" y3="-1.07568592" z3="-1.99553492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9249063" y3="-0.93865867" z3="-1.82491781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09418966" y3="-2.40139697" z3="-1.83250718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14796992" y3="-3.62727602" z3="0.68064759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01373758" y3="-5.21824801" z3="-4.74908341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24302492" y3="-4.97189642" z3="-3.70881681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84381015" y3="-4.3089803" z3="-1.08325504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77887932" y3="-4.56024549" z3="-2.85532503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55727769" y3="-5.07856351" z3="-3.24966654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85864361" y3="-4.74189952" z3="-1.93227655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49067809" y3="-4.24364491" z3="-1.52621211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81011954" y3="-4.46604375" z3="-3.20323228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35397981" y3="-5.39463001" z3="-3.92656327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89423197" y3="-4.79364843" z3="-1.58732003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03531425" y3="-3.8716725" z3="0.24075975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17723416" y3="-3.66293845" z3="0.88522102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06258545" y3="-4.12864933" z3="0.45074465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17144157" y3="-3.53498582" z3="2.35336215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22794198" y3="-3.36262143" z3="5.15212074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36465054" y3="-3.75344802" z3="3.05710877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00603318" y3="-3.23631724" z3="3.07513291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03159728" y3="-3.15046724" z3="4.46413636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39198696" y3="-3.66962068" z3="4.44643608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27793168" y3="-3.99916272" z3="2.50877944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04836339" y3="-3.09107534" z3="2.57006065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10374945" y3="-2.93678815" z3="5.00235023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32782416" y3="-3.85137815" z3="4.981837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24750073" y3="-3.30367104" z3="6.24391283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.407262" y3="-3.87615157" z3="-0.62025076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16607418" y3="-3.36801426" z3="-1.06991392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5306655" y3="0.25699408" z3="-4.72127974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08781513" y3="-1.73996785" z3="0.03481622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91793594" y3="-0.99338235" z3="1.20033261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86025517" y3="-0.3395568" z3="1.5383462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38978027" y3="0.54271065" z3="1.24028923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.48275616" y3="1.45683472" z3="-0.37727491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96985283" y3="-0.70779461" z3="1.39683707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37441169" y3="1.71926441" z3="2.69769843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89379794" y3="-0.99303733" z3="2.09668943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67021067" y3="-0.38468305" z3="3.35884741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23281201" y3="0.7775595" z3="-1.21044753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.2780276" y3="2.25962071" z3="-0.36571638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.47059889" y3="1.92532401" z3="-0.53350085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00944383" y3="-1.07881906" z3="2.43430578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93858457" y3="-0.23846301" z3="1.15357774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.843559" y3="-1.5457799" z3="0.69225455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42001707" y3="1.16855126" z3="3.65402716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5593354" y3="2.3120092" z3="2.69539474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22117483" y3="2.42861023" z3="2.66241417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80668516" y3="-0.83922774" z3="3.87001526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58497913" y3="-0.56649874" z3="3.93835239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50475906" y3="0.69894987" z3="3.24425698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8337817" y3="-0.68474081" z3="0.99277692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41720556" y3="-2.01538682" z3="0.86128396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76471046" y3="-2.65863786" z3="1.90579642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54445027" y3="-1.95772071" z3="3.08775342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01156305" y3="-0.66029871" z3="3.27554244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66489286" y3="-0.0309876" z3="2.22063347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5306407" y3="-2.51951516" z3="-0.09989109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37655882" y3="-3.67111354" z3="1.78807227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68204" y3="-2.55624249" z3="4.11164973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81987897" y3="-0.14423319" z3="4.21688544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00040201" y3="1.00392756" z3="2.33032396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78190873" y3="0.48151414" z3="-4.28780728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76560911" y3="-0.48239453" z3="-4.45764674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42604331" y3="-1.67417947" z3="-5.08560117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14437995" y3="-1.90957812" z3="-5.57095731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83257549" y3="-0.94270611" z3="-5.37799537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02034306" y3="1.40512105" z3="-3.75300872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78159226" y3="-0.33480348" z3="-4.08952249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44244282" y3="-2.7211565" z3="-5.22335571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07953087" y3="-2.85019196" z3="-6.07450266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85083303" y3="-1.13191921" z3="-5.7196357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33569873" y3="-1.85469083" z3="5.04304291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3216256" y3="-3.70469092" z3="3.95350781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22191101" y3="-3.62609546" z3="-6.00216384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44644838" y3="-2.63376217" z3="-4.53980895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07926353" y3="1.15673947" z3="-1.49596766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12250292" y3="1.54760679" z3="-2.47751982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45096185" y3="1.47335182" z3="-1.69477349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86738413" y3="2.12814899" z3="-2.82785842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17413523" y3="1.17407761" z3="-0.92979791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92605661" y3="2.36081201" z3="-2.97273081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58931468" y3="2.20591149" z3="-3.64936335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92354112" y3="2.4877019" z3="-3.81965958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8710608" y3="2.47918337" z3="-4.42583309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25985942" y3="2.98769022" z3="-4.7323551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42639128" y3="3.15939683" z3="-3.35836643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3159128" y3="3.57207761" z3="-4.15238215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23973643" y3="4.17039838" z3="-2.77227156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99924246" y3="5.50294304" z3="-3.00955236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06471686" y3="3.88185701" z3="-2.11902015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.64069544" y3="6.25841249" z3="-2.54691014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.10130059" y3="4.95778156" z3="-4.39132116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92748942" y3="5.90618952" z3="-3.84096789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25356536" y3="5.25570697" z3="-5.01612647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.75155083" y3="6.96912932" z3="-4.02930528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48450548" y3="-2.21991453" z3="-0.28893802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45141021" y3="-3.0068625" z3="-1.06153622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01240779" y3="-2.61017419" z3="0.5959328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10194763" y3="-1.39922496" z3="-0.70120855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1846816" y3="-1.43208451" z3="-1.13344789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32499137" y3="-0.39007391" z3="-1.47429449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10820337" y3="-1.55516518" z3="-0.92861746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42282272" y3="-2.08051103" z3="-1.98990108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3384,.0654,-.1923;7.3853,.1683,.4169;6.6484,.4448,-.3435;4.7369,1.2434,-2.2689;4.39,.4514,-1.1865;2.7382,.8547,-3.6703;3.6474,1.7559,-3.1478;1.4042,2.6001,-4.6419;1.5753,1.26,-4.3898;.5282,2.9363,-5.2053;2.925,-.4749,-3.4392;3.097,.0713,-1.0026;2.3961,-1.0757,-1.9955;.9249,-.9387,-1.8249;3.0942,-2.4014,-1.8325;-.148,-3.6273,.6806;-.0137,-5.2182,-4.7491;-.243,-4.9719,-3.7088;-.8438,-4.309,-1.0833;.7789,-4.5602,-2.8553;-1.5573,-5.0786,-3.2497;-1.8586,-4.7419,-1.9323;.4907,-4.2436,-1.5262;1.8101,-4.466,-3.2032;-2.354,-5.3946,-3.9266;-2.8942,-4.7936,-1.5873;-1.0353,-3.8717,.2408;-2.1772,-3.6629,.8852;-3.0626,-4.1286,.4507;-2.1714,-3.535,2.3534;-2.2279,-3.3626,5.1521;-3.3647,-3.7534,3.0571;-1.006,-3.2363,3.0751;-1.0316,-3.1505,4.4641;-3.392,-3.6696,4.4464;-4.2779,-3.9992,2.5088;-.0484,-3.0911,2.5701;-.1037,-2.9368,5.0024;-4.3278,-3.8514,4.9818;-2.2475,-3.3037,6.2439;1.4073,-3.8762,-.6203;2.1661,-3.368,-1.0699;.5307,.257,-4.7213;-3.0878,-1.74,.0348;-2.9179,-.9934,1.2003;-1.8603,-.3396,1.5383;-.3898,.5427,1.2403;-.4828,1.4568,-.3773;.9699,-.7078,1.3968;-.3744,1.7193,2.6977;-3.8938,-.993,2.0967;-3.6702,-.3847,3.3588;-.2328,.7776,-1.2104;.278,2.2596,-.3657;-1.4706,1.9253,-.5335;1.0094,-1.0788,2.4343;1.9386,-.2385,1.1536;.8436,-1.5458,.6923;-.42,1.1686,3.654;.5593,2.312,2.6954;-1.2212,2.4286,2.6624;-2.8067,-.8392,3.87;-4.585,-.5665,3.9384;-3.5048,.6989,3.2443;4.8338,-.6847,.9928;4.4172,-2.0154,.8613;3.7647,-2.6586,1.9058;3.5445,-1.9577,3.0878;4.0116,-.6603,3.2755;4.6649,-.031,2.2206;4.5306,-2.5195,-.0999;3.3766,-3.6711,1.7881;2.682,-2.5562,4.1116;3.8199,-.1442,4.2169;5.0004,1.0039,2.3303;-.7819,.4815,-4.2878;-1.7656,-.4824,-4.4576;-1.426,-1.6742,-5.0856;-.1444,-1.9096,-5.571;.8326,-.9427,-5.378;-1.0203,1.4051,-3.753;-2.7816,-.3348,-4.0895;-2.4424,-2.7212,-5.2234;.0795,-2.8502,-6.0745;1.8508,-1.1319,-5.7196;2.3357,-1.8547,5.043;2.3216,-3.7047,3.9535;-2.2219,-3.6261,-6.0022;-3.4464,-2.6338,-4.5398;7.0793,1.1567,-1.496;6.1225,1.5476,-2.4775;8.451,1.4734,-1.6948;8.8674,2.1281,-2.8279;9.1741,1.1741,-.9298;9.9261,2.3608,-2.9727;6.5893,2.2059,-3.6494;7.9235,2.4877,-3.8197;5.8711,2.4792,-4.4258;8.2599,2.9877,-4.7324;3.4264,3.1594,-3.3584;2.3159,3.5721,-4.1524;4.2397,4.1704,-2.7723;3.9992,5.5029,-3.0096;5.0647,3.8819,-2.119;4.6407,6.2584,-2.5469;2.1013,4.9578,-4.3913;2.9275,5.9062,-3.841;1.2536,5.2557,-5.0161;2.7516,6.9691,-4.0293;-4.4845,-2.2199,-.2889;-4.4514,-3.0069,-1.0615;-5.0124,-2.6102,.5959;-5.1019,-1.3992,-.7012;-2.1847,-1.4321,-1.1334;-2.325,-.3901,-1.4743;-1.1082,-1.5552,-.9286;-2.4228,-2.0805,-1.9899;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650391483208</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010157675024 0.000709513518 0.015493357687 0.005338963735</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030200374 -0.001773496 0.000158059 0.000176368 0.000213409 0.000310892 0.000339193 0.000376988 0.000526864 0.000576420 0.000755830 0.000784753 0.000834305 0.000923708 0.000941458 0.001099447 0.001124114 0.001155078 0.001250856 0.001331128 0.001362464 0.001621490 0.001679804 0.001873447 0.001964497 0.002229281 0.002323026 0.002635631 0.002872670 0.003243223 0.003301883 0.003781496 0.003903958 0.004102058 0.005072261 0.005290346 0.005491930 0.005848054 0.006281480 0.006493597 0.007066231 0.007271782 0.007846393 0.007977820 0.008642720 0.009023516 0.009384314 0.009857713 0.010051185 0.010947843 0.011635960 0.012259428 0.012846589 0.013282451 0.013848118 0.014600950 0.014963569 0.015148683 0.015286679 0.015502134 0.016162532 0.016786108 0.017930275 0.018208864 0.018766430 0.018872616 0.019896963 0.020914545 0.021256611 0.021944502 0.022782676 0.023820952 0.024344541 0.025862264 0.026356898 0.026893300 0.028288041 0.028785593 0.030705802 0.031440716 0.032136190 0.033389659 0.033757065 0.035023617 0.037310226 0.038058326 0.039176628 0.039266437 0.040793636 0.042915925 0.043562148 0.043957297 0.045386470 0.048348798 0.049081649 0.049472443 0.050154114 0.050985777 0.052120197 0.052332467 0.052391325 0.052611440 0.053544626 0.054040304 0.054528446 0.054753968 0.055160055 0.056042280 0.056364113 0.056473031 0.057140097 0.058442469 0.059486913 0.060631016 0.061157609 0.061763849 0.061967082 0.062332686 0.064900301 0.065714534 0.065842775 0.065963220 0.067494061 0.071863798 0.073786245 0.074812209 0.076909248 0.080523401 0.083634167 0.085026474 0.085665829 0.086334643 0.087385752 0.089720019 0.090777580 0.093501726 0.094506389 0.095563971 0.095824917 0.097283576 0.097396707 0.098215529 0.099200859 0.099407074 0.099915394 0.100777504 0.101499682 0.102371130 0.103003034 0.103738558 0.104475985 0.106296884 0.106735611 0.107118108 0.108914631 0.109691928 0.110555668 0.112248813 0.113175782 0.114032181 0.117302832 0.118641516 0.119446215 0.121169604 0.123414731 0.125045791 0.126018987 0.130505453 0.131565145 0.134803421 0.141629504 0.142390967 0.145044844 0.145777405 0.146557084 0.148084346 0.149319381 0.151268704 0.152885095 0.158300404 0.160225081 0.172136342 0.172929012 0.175684432 0.182736287 0.183377707 0.186214441 0.187818452 0.191078943 0.193124561 0.196551828 0.197826554 0.201940014 0.204773924 0.206752801 0.209612580 0.209732298 0.212662621 0.212978606 0.216466160 0.218092690 0.224202640 0.224948033 0.229774891 0.233721618 0.234342504 0.234945141 0.243627957 0.254311848 0.256525284 0.260233357 0.264990103 0.278348725 0.282229728 0.285998727 0.288172722 0.292352624 0.299288562 0.304219629 0.304987445 0.305809252 0.312977068 0.314628492 0.321544557 0.322009652 0.329075687 0.344427407 0.347526309 0.349957422 0.350747143 0.354377589 0.360801770 0.361545609 0.377050295 0.377715490 0.387431778 0.407692570 0.421815908 0.425942258 0.450470751 0.466254585 0.468630917 0.475618365 0.480195695 0.480852781 0.487151669 0.501809792 0.508523556 0.533372147 0.564570378 0.567071881 0.584039802 0.592155126 0.596696511 0.603221968 0.637025338 0.641286145 0.644216037 0.665481272 0.672374189 0.683720254 0.685045619 0.691233603 0.697819772 0.703816884 0.713404193 0.723323445 0.738680701 0.749933851 0.759277617 0.771847084 0.776661656 0.805209181 0.808986502 0.812643367 0.813321032 0.820016352 0.820765960 0.829093541 0.830711391 0.831549521 0.841043825 0.844820474 0.844936562 0.850631003 0.857515543 0.863494593 0.864620082 0.870575139 0.873923045 0.883323186 0.887411422 0.891603239 0.895765886 0.917920462 0.922125061 0.930437023 0.932257968 0.963788780 0.975207338 0.983708160 0.999117954 1.010080217 1.024152052 1.039682871 1.047363248 1.053767715 1.060056069 1.085340391 1.086040494 1.096484185 1.104750138 1.110954975 1.112185887 1.122714435 1.123584026 1.134996126 1.138975777 1.170313046 1.170611637 1.179019667 1.185488260 1.194062612 1.211364793 1.220021165 1.264457399 1.295637312 1.313361570 1.322141769 1.323964483 1.325883486 1.328836124 1.332937565 1.341163063 1.341809726 1.355397174 1.374678488 1.380360541 1.380927829 1.387546214 1.414378331 1.418414195 1.550998124 1.659953067 1.772047442</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">67</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33850062" y3="0.0620777" z3="-0.19170475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38482851" y3="0.16961613" z3="0.41833912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64755295" y3="0.44498856" z3="-0.34201311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73469084" y3="1.24138425" z3="-2.2669968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38938947" y3="0.44690224" z3="-1.18583633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7355613" y3="0.85234583" z3="-3.66752947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64387853" y3="1.75362374" z3="-3.14457549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39805493" y3="2.59752854" z3="-4.63488666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57097818" y3="1.25770295" z3="-4.38431324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52157709" y3="2.9329979" z3="-5.19797348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92517824" y3="-0.47761331" z3="-3.43952478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09726051" y3="0.06404062" z3="-1.00234864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39763314" y3="-1.08223235" z3="-1.99701077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92632052" y3="-0.94728639" z3="-1.82590414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09689572" y3="-2.40762411" z3="-1.83618925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14682501" y3="-3.62277148" z3="0.67835425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01441786" y3="-5.22789902" z3="-4.74770836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24360992" y3="-4.97812674" z3="-3.70819164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8432474" y3="-4.30788138" z3="-1.08433452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77953414" y3="-4.56818725" z3="-2.85502192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55877795" y3="-5.07928137" z3="-3.24964772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85943106" y3="-4.73906178" z3="-1.93308232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49167548" y3="-4.24759977" z3="-1.5266893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81170481" y3="-4.47878004" z3="-3.20257003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35632909" y3="-5.39408132" z3="-3.92625805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89522954" y3="-4.78709863" z3="-1.58854276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03435727" y3="-3.86749194" z3="0.23895348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17493351" y3="-3.66035135" z3="0.88459867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06211949" y3="-4.12282856" z3="0.4487494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17051028" y3="-3.52967571" z3="2.3517087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22789088" y3="-3.35525931" z3="5.15018064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3652582" y3="-3.74382633" z3="3.05480496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00464743" y3="-3.23370116" z3="3.07376651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03064117" y3="-3.14685008" z3="4.46265624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39293818" y3="-3.65901876" z3="4.44404863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27956788" y3="-3.98662711" z3="2.50604851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04649856" y3="-3.09157394" z3="2.56902862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10235387" y3="-2.9356457" z3="5.00114781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32963185" y3="-3.83778335" z3="4.97912598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24778042" y3="-3.29549957" z3="6.24194834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40957168" y3="-3.88139157" z3="-0.62129949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16831771" y3="-3.37435615" z3="-1.07171806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52746679" y3="0.25411889" z3="-4.71714988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0882159" y3="-1.73260166" z3="0.03117758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91466703" y3="-0.98684663" z3="1.19625781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85443488" y3="-0.3351929" z3="1.53313142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38342063" y3="0.54401436" z3="1.23470959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47216535" y3="1.45521371" z3="-0.38470644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97343729" y3="-0.70851311" z3="1.39585845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3657567" y3="1.72459746" z3="2.68936609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88996141" y3="-0.9835676" z3="2.09403014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66308388" y3="-0.37465221" z3="3.35547006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2258519" y3="0.77330847" z3="-1.21661628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29352096" y3="2.2536694" z3="-0.37471154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45738052" y3="1.9294185" z3="-0.54197159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01013522" y3="-1.07847385" z3="2.43381092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94301386" y3="-0.24080361" z3="1.15403454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84738847" y3="-1.54688698" z3="0.69195064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41534416" y3="1.17622738" z3="3.6469378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5685083" y3="2.31477252" z3="2.68777921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2102258" y3="2.43543173" z3="2.6507471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79977743" y3="-0.83115858" z3="3.86587499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57771937" y3="-0.55359546" z3="3.93640488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49517412" y3="0.70874532" z3="3.24020408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83512615" y3="-0.68980089" z3="0.99279065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41672127" y3="-2.01976068" z3="0.85954578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76441829" y3="-2.66389722" z3="1.90362502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54649146" y3="-1.96475257" z3="3.08710388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0160177" y3="-0.66839821" z3="3.27679147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66883803" y3="-0.03807095" z3="2.22213965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52830526" y3="-2.5224183" z3="-0.10263751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37459345" y3="-3.67560818" z3="1.78443937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68418314" y3="-2.56368482" z3="4.1108596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82647708" y3="-0.15380865" z3="4.21946602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00569099" y3="0.99628671" z3="2.33322031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78771855" y3="0.47574455" z3="-4.28493045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77022137" y3="-0.49139368" z3="-4.46127845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42759203" y3="-1.68354778" z3="-5.08996844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14288191" y3="-1.91536587" z3="-5.57440356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83270945" y3="-0.9451679" z3="-5.37711625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0272248" y3="1.39933962" z3="-3.75320343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78601057" y3="-0.34234966" z3="-4.09650829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44270377" y3="-2.72921454" z3="-5.22384521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08405607" y3="-2.85561264" z3="-6.07805785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85322628" y3="-1.13145904" z3="-5.71846427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34086348" y3="-1.86431316" z3="5.04358455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32078423" y3="-3.71005522" z3="3.95121028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22505906" y3="-3.6337889" z3="-5.9995705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44172551" y3="-2.63598177" z3="-4.54195326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07694743" y3="1.1595003" z3="-1.49345054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11953416" y3="1.54921397" z3="-2.47483664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44783587" y3="1.48020935" z3="-1.69122062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86291813" y3="2.13788132" z3="-2.82315083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17152042" y3="1.18193602" z3="-0.92633913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92099211" y3="2.37384949" z3="-2.96717492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58500711" y3="2.21048096" z3="-3.64552299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91851447" y3="2.49626535" z3="-3.81483494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86629283" y3="2.48297044" z3="-4.42183911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25383427" y3="2.9986338" z3="-4.72661572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42028713" y3="3.15702861" z3="-3.3522665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30873297" y3="3.56942124" z3="-4.14490453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23167704" y3="4.16816821" z3="-2.76415754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98826642" y3="5.5006302" z3="-2.99822113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05723701" y3="3.87994731" z3="-2.1115113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62766736" y3="6.25658135" z3="-2.53325307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09160441" y3="4.95463066" z3="-4.38134265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91573567" y3="5.90336441" z3="-3.82881673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24298311" y3="5.25201797" z3="-5.00520257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73737685" y3="6.96620532" z3="-4.01444221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48453638" y3="-2.21338529" z3="-0.29004684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45233522" y3="-3.00210961" z3="-1.06069848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01209687" y3="-2.60123841" z3="0.59629507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10131574" y3="-1.39342526" z3="-0.70416742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1842255" y3="-1.42943934" z3="-1.13728953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31958645" y3="-0.38587135" z3="-1.47751154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10760526" y3="-1.55691792" z3="-0.933734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42636412" y3="-2.07783092" z3="-1.99280023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3385,.0621,-.1917;7.3848,.1696,.4183;6.6476,.445,-.342;4.7347,1.2414,-2.267;4.3894,.4469,-1.1858;2.7356,.8523,-3.6675;3.6439,1.7536,-3.1446;1.3981,2.5975,-4.6349;1.571,1.2577,-4.3843;.5216,2.933,-5.198;2.9252,-.4776,-3.4395;3.0973,.064,-1.0023;2.3976,-1.0822,-1.997;.9263,-.9473,-1.8259;3.0969,-2.4076,-1.8362;-.1468,-3.6228,.6784;-.0144,-5.2279,-4.7477;-.2436,-4.9781,-3.7082;-.8432,-4.3079,-1.0843;.7795,-4.5682,-2.855;-1.5588,-5.0793,-3.2496;-1.8594,-4.7391,-1.9331;.4917,-4.2476,-1.5267;1.8117,-4.4788,-3.2026;-2.3563,-5.3941,-3.9263;-2.8952,-4.7871,-1.5885;-1.0344,-3.8675,.239;-2.1749,-3.6604,.8846;-3.0621,-4.1228,.4487;-2.1705,-3.5297,2.3517;-2.2279,-3.3553,5.1502;-3.3653,-3.7438,3.0548;-1.0046,-3.2337,3.0738;-1.0306,-3.1469,4.4627;-3.3929,-3.659,4.444;-4.2796,-3.9866,2.506;-.0465,-3.0916,2.569;-.1024,-2.9356,5.0011;-4.3296,-3.8378,4.9791;-2.2478,-3.2955,6.2419;1.4096,-3.8814,-.6213;2.1683,-3.3744,-1.0717;.5275,.2541,-4.7171;-3.0882,-1.7326,.0312;-2.9147,-.9868,1.1963;-1.8544,-.3352,1.5331;-.3834,.544,1.2347;-.4722,1.4552,-.3847;.9734,-.7085,1.3959;-.3658,1.7246,2.6894;-3.89,-.9836,2.094;-3.6631,-.3747,3.3555;-.2259,.7733,-1.2166;.2935,2.2537,-.3747;-1.4574,1.9294,-.542;1.0101,-1.0785,2.4338;1.943,-.2408,1.154;.8474,-1.5469,.692;-.4153,1.1762,3.6469;.5685,2.3148,2.6878;-1.2102,2.4354,2.6507;-2.7998,-.8312,3.8659;-4.5777,-.5536,3.9364;-3.4952,.7087,3.2402;4.8351,-.6898,.9928;4.4167,-2.0198,.8595;3.7644,-2.6639,1.9036;3.5465,-1.9648,3.0871;4.016,-.6684,3.2768;4.6688,-.0381,2.2221;4.5283,-2.5224,-.1026;3.3746,-3.6756,1.7844;2.6842,-2.5637,4.1109;3.8265,-.1538,4.2195;5.0057,.9963,2.3332;-.7877,.4757,-4.2849;-1.7702,-.4914,-4.4613;-1.4276,-1.6835,-5.09;-.1429,-1.9154,-5.5744;.8327,-.9452,-5.3771;-1.0272,1.3993,-3.7532;-2.786,-.3423,-4.0965;-2.4427,-2.7292,-5.2238;.0841,-2.8556,-6.0781;1.8532,-1.1315,-5.7185;2.3409,-1.8643,5.0436;2.3208,-3.7101,3.9512;-2.2251,-3.6338,-5.9996;-3.4417,-2.636,-4.542;7.0769,1.1595,-1.4935;6.1195,1.5492,-2.4748;8.4478,1.4802,-1.6912;8.8629,2.1379,-2.8232;9.1715,1.1819,-.9263;9.921,2.3738,-2.9672;6.585,2.2105,-3.6455;7.9185,2.4963,-3.8148;5.8663,2.483,-4.4218;8.2538,2.9986,-4.7266;3.4203,3.157,-3.3523;2.3087,3.5694,-4.1449;4.2317,4.1682,-2.7642;3.9883,5.5006,-2.9982;5.0572,3.8799,-2.1115;4.6277,6.2566,-2.5333;2.0916,4.9546,-4.3813;2.9157,5.9034,-3.8288;1.243,5.252,-5.0052;2.7374,6.9662,-4.0144;-4.4845,-2.2134,-.29;-4.4523,-3.0021,-1.0607;-5.0121,-2.6012,.5963;-5.1013,-1.3934,-.7042;-2.1842,-1.4294,-1.1373;-2.3196,-.3859,-1.4775;-1.1076,-1.5569,-.9337;-2.4264,-2.0778,-1.9928;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650402850435</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006715460742 0.000558309595 0.015570606420 0.005335819071</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030251055 -0.001444695 0.000157971 0.000177464 0.000213771 0.000311017 0.000339325 0.000377194 0.000526796 0.000577518 0.000756405 0.000784712 0.000834613 0.000925076 0.000943457 0.001099939 0.001134564 0.001157479 0.001253218 0.001331429 0.001363121 0.001621622 0.001682672 0.001873893 0.001965899 0.002229261 0.002325158 0.002637660 0.002872770 0.003244029 0.003301978 0.003782955 0.003907873 0.004102306 0.005080809 0.005290403 0.005492038 0.005857832 0.006282523 0.006494726 0.007075886 0.007275339 0.007846372 0.007980838 0.008672667 0.009034824 0.009422118 0.009863004 0.010058319 0.010947786 0.011641932 0.012259787 0.012850062 0.013285728 0.013853430 0.014610329 0.014972440 0.015149727 0.015300837 0.015503224 0.016164184 0.016792596 0.017952453 0.018209887 0.018780319 0.018907219 0.019896493 0.020920763 0.021275061 0.021960277 0.022795687 0.023944645 0.024361533 0.025863899 0.026358025 0.026895486 0.028289476 0.028785716 0.030706234 0.031440908 0.032140793 0.033392591 0.033757463 0.035037844 0.037309656 0.038062406 0.039181266 0.039275572 0.040793836 0.043189131 0.043697189 0.043957235 0.045396318 0.048357911 0.049082068 0.049474694 0.050153981 0.050986095 0.052120570 0.052332472 0.052391296 0.052612697 0.053546063 0.054043122 0.054610895 0.054788390 0.055161644 0.056042339 0.056364678 0.056473801 0.057141295 0.058443576 0.059488025 0.060635899 0.061157579 0.061810890 0.061970372 0.062335921 0.064901739 0.065717833 0.065854061 0.065963031 0.067496350 0.071869332 0.073786489 0.074814261 0.076913399 0.080546722 0.083634054 0.085030686 0.085688586 0.086336008 0.087401689 0.089722836 0.090777643 0.093525529 0.094506466 0.095563953 0.095825708 0.097310432 0.097396960 0.098215524 0.099211910 0.099443127 0.099915367 0.100781182 0.101500005 0.102377129 0.103003358 0.103741838 0.104475911 0.106307752 0.106740228 0.107118073 0.108921398 0.109692879 0.110560436 0.112249025 0.113177096 0.114034906 0.117309073 0.118643358 0.119451383 0.121171690 0.123417894 0.125058074 0.126019501 0.130505274 0.131564827 0.134804559 0.141657753 0.142391885 0.145098450 0.145823750 0.146572448 0.148120234 0.149767961 0.151428774 0.152884444 0.158508847 0.160226743 0.172145594 0.172929173 0.175685138 0.182737298 0.183393687 0.186216685 0.187819924 0.191087472 0.193126221 0.196557539 0.197826640 0.201939825 0.204773413 0.206752870 0.209612719 0.209736789 0.212676924 0.213042596 0.216467110 0.218104755 0.224203720 0.224956428 0.229775041 0.233721629 0.234343841 0.234947092 0.243631587 0.254320696 0.256525995 0.260315213 0.265087071 0.278353150 0.282229917 0.285998729 0.288225406 0.292381563 0.299295835 0.304220029 0.304990598 0.305808958 0.313013309 0.314630841 0.321546945 0.322072769 0.329123916 0.344427106 0.347695810 0.350006833 0.350767899 0.354378194 0.360804469 0.361556752 0.377050700 0.377725239 0.387783478 0.407862721 0.421816635 0.425945941 0.450477936 0.466258097 0.468630932 0.475618891 0.480238915 0.480853949 0.487161648 0.501952948 0.508530906 0.533378259 0.564589441 0.567125586 0.584328175 0.592155219 0.596695961 0.603226174 0.637025381 0.641303925 0.644247885 0.665494837 0.672393928 0.683721233 0.685048178 0.691235561 0.697832504 0.703817023 0.713428861 0.723324031 0.738683675 0.749933985 0.759278293 0.771847161 0.776661671 0.805225366 0.808992133 0.812643456 0.813326595 0.820018404 0.820775147 0.829114674 0.830724888 0.831553972 0.841059804 0.844820390 0.844936565 0.850631835 0.857519272 0.863499980 0.864620661 0.870602576 0.873928169 0.883326270 0.887413885 0.891606665 0.895807898 0.917920939 0.922129739 0.930445234 0.932264578 0.963801111 0.975207398 0.983748134 0.999120805 1.010369498 1.024190327 1.039739229 1.047405416 1.053861856 1.060129704 1.085340746 1.086053127 1.096484946 1.104752816 1.111011652 1.112195142 1.122716926 1.123587917 1.134996449 1.138975770 1.170327896 1.170617525 1.179023072 1.185488375 1.194062981 1.211577456 1.220021142 1.264588790 1.295638128 1.313417012 1.322946137 1.323992622 1.325948205 1.328857288 1.332939690 1.341169388 1.341809867 1.355404522 1.374678456 1.380360491 1.380927595 1.387589267 1.417466990 1.418417309 1.550998090 1.659953689 1.772053276</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">68</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33823015" y3="0.05896393" z3="-0.19095681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38411473" y3="0.17144089" z3="0.42001711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64635828" y3="0.44570029" z3="-0.34029587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73205082" y3="1.23963443" z3="-2.26476769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38843351" y3="0.44259472" z3="-1.18499429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73401897" y3="0.84816845" z3="-3.6672422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63999935" y3="1.75102169" z3="-3.14136454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39284139" y3="2.59279718" z3="-4.63051873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56898349" y3="1.25181907" z3="-4.38452096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51539587" y3="2.92822078" z3="-5.19210085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92604341" y3="-0.48164473" z3="-3.44105154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0970267" y3="0.05661691" z3="-1.0025396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39913274" y3="-1.0889077" z3="-1.99941097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92754709" y3="-0.95572901" z3="-1.82837303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.099646" y3="-2.41372732" z3="-1.8401356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14578935" y3="-3.61958254" z3="0.6762054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01421517" y3="-5.23540463" z3="-4.7466189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24329215" y3="-4.9833493" z3="-3.70771883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.843035" y3="-4.30666604" z3="-1.08535584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77978219" y3="-4.57392913" z3="-2.85466333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5585231" y3="-5.08079088" z3="-3.24964063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85930278" y3="-4.73707608" z3="-1.93402698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49205958" y3="-4.25043048" z3="-1.52717766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81193607" y3="-4.48711171" z3="-3.2015237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35598629" y3="-5.39552597" z3="-3.92600768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89548788" y3="-4.78150596" z3="-1.59024253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0336181" y3="-3.86416606" z3="0.2372107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1748633" y3="-3.65407532" z3="0.88211785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06103689" y3="-4.11824078" z3="0.44757094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16963528" y3="-3.52371089" z3="2.34986836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22765929" y3="-3.34713259" z3="5.14831991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36527687" y3="-3.73350024" z3="3.05273541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00272515" y3="-3.23183327" z3="3.0723687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02901562" y3="-3.14395398" z3="4.46123886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39336709" y3="-3.64749957" z3="4.44188854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27991044" y3="-3.97390194" z3="2.50380992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04327441" y3="-3.09448923" z3="2.5681772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10002589" y3="-2.93611861" z3="5.00011426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33121585" y3="-3.82221275" z3="4.97659944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24777175" y3="-3.2866344" z3="6.2400469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41037942" y3="-3.88477105" z3="-0.62205965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17025091" y3="-3.38019645" z3="-1.07331207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52659167" y3="0.24734897" z3="-4.71925415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08492507" y3="-1.72855864" z3="0.02983577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91094044" y3="-0.98018076" z3="1.1933217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85134923" y3="-0.32786403" z3="1.52796298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37622505" y3="0.54659237" z3="1.22887329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46149238" y3="1.4541817" z3="-0.3926457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9771565" y3="-0.70962649" z3="1.39498675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35953129" y3="1.73004816" z3="2.68050662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.885191" y3="-0.97521952" z3="2.09157641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65738019" y3="-0.3648621" z3="3.35181831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21945895" y3="0.7692295" z3="-1.22363186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30720676" y3="2.24914661" z3="-0.38499119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44459295" y3="1.93170455" z3="-0.54960741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01088687" y3="-1.07848783" z3="2.43349116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94866821" y3="-0.24461513" z3="1.15453868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8502571" y3="-1.54865547" z3="0.69166124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40780412" y3="1.18498731" z3="3.6396451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57321641" y3="2.32161323" z3="2.67718173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20477649" y3="2.43863297" z3="2.6397291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79481216" y3="-0.82137003" z3="3.86270109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57180563" y3="-0.54199469" z3="3.93319544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48807806" y3="0.71795846" z3="3.2346658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83632409" y3="-0.6950295" z3="0.99277823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41582901" y3="-2.02417445" z3="0.85707102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7636414" y3="-2.66955616" z3="1.90041282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54836405" y3="-1.97265807" z3="3.0858207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0205812" y3="-0.67760301" z3="3.27806779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67297767" y3="-0.04584556" z3="2.22398541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5253511" y3="-2.52488694" z3="-0.10651506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37187507" y3="-3.68033854" z3="1.77923051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68642364" y3="-2.57245719" z3="4.10939742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83321965" y3="-0.16492065" z3="4.22224009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01167676" y3="0.98778871" z3="2.33714651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78761452" y3="0.47079286" z3="-4.28970695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76974177" y3="-0.49367061" z3="-4.46031483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42685092" y3="-1.68554785" z3="-5.08704795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14388195" y3="-1.91955035" z3="-5.57007666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83157762" y3="-0.95203654" z3="-5.37496447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02907204" y3="1.3944952" z3="-3.75600857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78809492" y3="-0.34803626" z3="-4.09494212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44180082" y3="-2.73341383" z3="-5.22724941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08151046" y3="-2.8598044" z3="-6.07207488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85088847" y3="-1.14050565" z3="-5.71351281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3504604" y3="-1.87609484" z3="5.04798779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31620435" y3="-3.71650484" z3="3.944124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22115122" y3="-3.63591135" z3="-6.0074009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44400078" y3="-2.64725105" z3="-4.54320926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07431378" y3="1.16270313" z3="-1.4907074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11620834" y3="1.55123714" z3="-2.4718846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4444119" y3="1.4871732" z3="-1.68758877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85813327" y3="2.147367" z3="-2.81851262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16859152" y3="1.18971383" z3="-0.92286655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91560436" y3="2.38616387" z3="-2.96187414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58032042" y3="2.21528671" z3="-3.64152502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9131287" y3="2.50465837" z3="-3.81002215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86112119" y3="2.48696124" z3="-4.41769178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2474456" y3="3.00901946" z3="-4.7210272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41329086" y3="3.15465825" z3="-3.34541801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30077149" y3="3.56649787" z3="-4.13695158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22282423" y3="4.16621527" z3="-2.75523577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97687008" y3="5.49862578" z3="-2.98658799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04930532" y3="3.87814257" z3="-2.10369215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6155712" y3="6.25434804" z3="-2.52105007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08056034" y3="4.95216959" z3="-4.36989469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90323858" y3="5.90119373" z3="-3.81588034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23155119" y3="5.24910434" z3="-4.99338338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72327461" y3="6.96386221" z3="-3.99985611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48310568" y3="-2.20672857" z3="-0.29021101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45304759" y3="-2.99698991" z3="-1.05967707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01082496" y3="-2.59217776" z3="0.59693865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0992171" y3="-1.38646819" z3="-0.70524101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18257421" y3="-1.42620451" z3="-1.1402176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31924178" y3="-0.38454095" z3="-1.48255701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1065089" y3="-1.55257944" z3="-0.93719342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42487297" y3="-2.07519377" z3="-1.99469868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3382,.059,-.191;7.3841,.1714,.42;6.6464,.4457,-.3403;4.7321,1.2396,-2.2648;4.3884,.4426,-1.185;2.734,.8482,-3.6672;3.64,1.751,-3.1414;1.3928,2.5928,-4.6305;1.569,1.2518,-4.3845;.5154,2.9282,-5.1921;2.926,-.4816,-3.4411;3.097,.0566,-1.0025;2.3991,-1.0889,-1.9994;.9275,-.9557,-1.8284;3.0996,-2.4137,-1.8401;-.1458,-3.6196,.6762;-.0142,-5.2354,-4.7466;-.2433,-4.9833,-3.7077;-.843,-4.3067,-1.0854;.7798,-4.5739,-2.8547;-1.5585,-5.0808,-3.2496;-1.8593,-4.7371,-1.934;.4921,-4.2504,-1.5272;1.8119,-4.4871,-3.2015;-2.356,-5.3955,-3.926;-2.8955,-4.7815,-1.5902;-1.0336,-3.8642,.2372;-2.1749,-3.6541,.8821;-3.061,-4.1182,.4476;-2.1696,-3.5237,2.3499;-2.2277,-3.3471,5.1483;-3.3653,-3.7335,3.0527;-1.0027,-3.2318,3.0724;-1.029,-3.144,4.4612;-3.3934,-3.6475,4.4419;-4.2799,-3.9739,2.5038;-.0433,-3.0945,2.5682;-.1,-2.9361,5.0001;-4.3312,-3.8222,4.9766;-2.2478,-3.2866,6.24;1.4104,-3.8848,-.6221;2.1703,-3.3802,-1.0733;.5266,.2473,-4.7193;-3.0849,-1.7286,.0298;-2.9109,-.9802,1.1933;-1.8513,-.3279,1.528;-.3762,.5466,1.2289;-.4615,1.4542,-.3926;.9772,-.7096,1.395;-.3595,1.73,2.6805;-3.8852,-.9752,2.0916;-3.6574,-.3649,3.3518;-.2195,.7692,-1.2236;.3072,2.2491,-.385;-1.4446,1.9317,-.5496;1.0109,-1.0785,2.4335;1.9487,-.2446,1.1545;.8503,-1.5487,.6917;-.4078,1.185,3.6396;.5732,2.3216,2.6772;-1.2048,2.4386,2.6397;-2.7948,-.8214,3.8627;-4.5718,-.542,3.9332;-3.4881,.718,3.2347;4.8363,-.695,.9928;4.4158,-2.0242,.8571;3.7636,-2.6696,1.9004;3.5484,-1.9727,3.0858;4.0206,-.6776,3.2781;4.673,-.0458,2.224;4.5254,-2.5249,-.1065;3.3719,-3.6803,1.7792;2.6864,-2.5725,4.1094;3.8332,-.1649,4.2222;5.0117,.9878,2.3371;-.7876,.4708,-4.2897;-1.7697,-.4937,-4.4603;-1.4269,-1.6855,-5.087;-.1439,-1.9196,-5.5701;.8316,-.952,-5.375;-1.0291,1.3945,-3.756;-2.7881,-.348,-4.0949;-2.4418,-2.7334,-5.2272;.0815,-2.8598,-6.0721;1.8509,-1.1405,-5.7135;2.3505,-1.8761,5.048;2.3162,-3.7165,3.9441;-2.2212,-3.6359,-6.0074;-3.444,-2.6473,-4.5432;7.0743,1.1627,-1.4907;6.1162,1.5512,-2.4719;8.4444,1.4872,-1.6876;8.8581,2.1474,-2.8185;9.1686,1.1897,-.9229;9.9156,2.3862,-2.9619;6.5803,2.2153,-3.6415;7.9131,2.5047,-3.81;5.8611,2.487,-4.4177;8.2474,3.009,-4.721;3.4133,3.1547,-3.3454;2.3008,3.5665,-4.137;4.2228,4.1662,-2.7552;3.9769,5.4986,-2.9866;5.0493,3.8781,-2.1037;4.6156,6.2543,-2.5211;2.0806,4.9522,-4.3699;2.9032,5.9012,-3.8159;1.2316,5.2491,-4.9934;2.7233,6.9639,-3.9999;-4.4831,-2.2067,-.2902;-4.453,-2.997,-1.0597;-5.0108,-2.5922,.5969;-5.0992,-1.3865,-.7052;-2.1826,-1.4262,-1.1402;-2.3192,-.3845,-1.4826;-1.1065,-1.5526,-.9372;-2.4249,-2.0752,-1.9947;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650406959721</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004505314583 0.000526843374 0.021926903585 0.005337188428</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030276863 -0.001485031 0.000160549 0.000177489 0.000214127 0.000312827 0.000339220 0.000376164 0.000527009 0.000577695 0.000758169 0.000787315 0.000837578 0.000927496 0.000956238 0.001101982 0.001147299 0.001194947 0.001295887 0.001341065 0.001366049 0.001626096 0.001695434 0.001882590 0.001970238 0.002232580 0.002327652 0.002639050 0.002873808 0.003243812 0.003306677 0.003789284 0.003913915 0.004102401 0.005097303 0.005290578 0.005492096 0.005856782 0.006283182 0.006502473 0.007097362 0.007274624 0.007848622 0.007996880 0.008676918 0.009043179 0.009457264 0.009865032 0.010070331 0.010947917 0.011652431 0.012260255 0.012854573 0.013285241 0.013860834 0.014610569 0.014973005 0.015148328 0.015309264 0.015507100 0.016166191 0.016805266 0.017979090 0.018211683 0.018786869 0.018993391 0.019898301 0.020927276 0.021281045 0.021981731 0.022808023 0.024065450 0.024379305 0.025866113 0.026360197 0.026895136 0.028293836 0.028785786 0.030710446 0.031441188 0.032141120 0.033392214 0.033757769 0.035047066 0.037311206 0.038069951 0.039187457 0.039275419 0.040795403 0.043260654 0.043835943 0.043957307 0.045401646 0.048367436 0.049082597 0.049484017 0.050155625 0.050986214 0.052121131 0.052332482 0.052391276 0.052612552 0.053546122 0.054047665 0.054666945 0.054930221 0.055170517 0.056043596 0.056365435 0.056475620 0.057142234 0.058445966 0.059489794 0.060641728 0.061157743 0.061869814 0.061979202 0.062338081 0.064902053 0.065717548 0.065860333 0.065968929 0.067496084 0.071873708 0.073786390 0.074815583 0.076916412 0.080570301 0.083634344 0.085033347 0.085712919 0.086337107 0.087424781 0.089728811 0.090778897 0.093552365 0.094506732 0.095563962 0.095828070 0.097351363 0.097398411 0.098215551 0.099227443 0.099532413 0.099919714 0.100801331 0.101500193 0.102394121 0.103003802 0.103743787 0.104477065 0.106317215 0.106755562 0.107118069 0.108926486 0.109693382 0.110564411 0.112254243 0.113178471 0.114035082 0.117314902 0.118645823 0.119451542 0.121171499 0.123425282 0.125062511 0.126020071 0.130510988 0.131566803 0.134805504 0.141669432 0.142392606 0.145112993 0.145863283 0.146594166 0.148150575 0.149939286 0.151485661 0.152887016 0.158647469 0.160226825 0.172153814 0.172929243 0.175687092 0.182741254 0.183397608 0.186219035 0.187820903 0.191104795 0.193126943 0.196561828 0.197827004 0.201950162 0.204777383 0.206752867 0.209612712 0.209757085 0.212676078 0.213132739 0.216470202 0.218111821 0.224208353 0.224971851 0.229775727 0.233722155 0.234344025 0.234951108 0.243643936 0.254344882 0.256528098 0.260462569 0.265247525 0.278362224 0.282230219 0.285999562 0.288305381 0.292418097 0.299296152 0.304222365 0.304998610 0.305810811 0.313042263 0.314633877 0.321547947 0.322123803 0.329178768 0.344466240 0.347860331 0.350143161 0.350771818 0.354378307 0.360807482 0.361571251 0.377052600 0.377734845 0.388195407 0.408064461 0.421816635 0.425948960 0.450481069 0.466260270 0.468631429 0.475619090 0.480324391 0.480870415 0.487204126 0.502158609 0.508532725 0.533391202 0.564606255 0.567174357 0.584679220 0.592155226 0.596725576 0.603230996 0.637027137 0.641306525 0.644279546 0.665504418 0.672407189 0.683721672 0.685047932 0.691237385 0.697884708 0.703817227 0.713437465 0.723324987 0.738685694 0.749934052 0.759281205 0.771847745 0.776661670 0.805227563 0.808992107 0.812643510 0.813337333 0.820018368 0.820775429 0.829160634 0.830725114 0.831555122 0.841070043 0.844832313 0.844942878 0.850655050 0.857522903 0.863515097 0.864620922 0.870622414 0.873945612 0.883330402 0.887417508 0.891606957 0.895822398 0.917923431 0.922135582 0.930459358 0.932269718 0.963807669 0.975207433 0.983793679 0.999124350 1.010664882 1.024220988 1.039796220 1.047447329 1.053947871 1.060190387 1.085342903 1.086067414 1.096485383 1.104754951 1.111097287 1.112210689 1.122720825 1.123593253 1.134996743 1.138977302 1.170337508 1.170620253 1.179024073 1.185491167 1.194063225 1.212000290 1.220022385 1.264697586 1.295638080 1.313448155 1.323655968 1.324146143 1.326117313 1.328874936 1.332942119 1.341169332 1.341819679 1.355406599 1.374678431 1.380360406 1.380927372 1.387606375 1.418395268 1.418877320 1.550998209 1.659954797 1.772068442</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">69</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33837516" y3="0.05522947" z3="-0.19068587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38368591" y3="0.17145147" z3="0.42097368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64558278" y3="0.44497135" z3="-0.33923847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73010615" y3="1.23744309" z3="-2.26305768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38799826" y3="0.43837093" z3="-1.18437357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73167162" y3="0.8460481" z3="-3.66400901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63722248" y3="1.74850673" z3="-3.13864682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38737498" y3="2.58988816" z3="-4.62387203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56478095" y3="1.25005267" z3="-4.37778741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5091344" y3="2.92456209" z3="-5.18475423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92644764" y3="-0.48406477" z3="-3.44083815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09740245" y3="0.0501458" z3="-1.00222791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40063796" y3="-1.09490303" z3="-2.00033419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92898772" y3="-0.96377019" z3="-1.82873822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1024172" y3="-2.41930169" z3="-1.84317314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14449737" y3="-3.61605155" z3="0.67488106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01373986" y3="-5.24445279" z3="-4.74487719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24275164" y3="-4.98947541" z3="-3.70658252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84194999" y3="-4.30549523" z3="-1.08582458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78120969" y3="-4.58092388" z3="-2.85390168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55868166" y3="-5.08233018" z3="-3.2488712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85917618" y3="-4.73485577" z3="-1.93414209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49365267" y3="-4.25385066" z3="-1.52713815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81403514" y3="-4.49788948" z3="-3.20065292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35714893" y3="-5.39610686" z3="-3.92489874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89574809" y3="-4.77561677" z3="-1.59088989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03245729" y3="-3.86015507" z3="0.23587554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17288941" y3="-3.65079194" z3="0.88128369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06015004" y3="-4.11345068" z3="0.44633334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16834936" y3="-3.51841543" z3="2.3484268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22726005" y3="-3.33905258" z3="5.14663687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36396363" y3="-3.72641483" z3="3.05119104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00200061" y3="-3.22716402" z3="3.07089401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02877244" y3="-3.13790442" z3="4.45963934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39249557" y3="-3.63896769" z3="4.44021756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27828115" y3="-3.9666141" z3="2.50235114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04284008" y3="-3.09151837" z3="2.56684161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10014625" y3="-2.93100198" z3="4.99863194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33011502" y3="-3.8124985" z3="4.97482723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24783529" y3="-3.27721925" z3="6.23825669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41306802" y3="-3.88930204" z3="-0.62240296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17258585" y3="-3.38562856" z3="-1.07421683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52341914" y3="0.24534276" z3="-4.71221075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08473104" y3="-1.72344236" z3="0.02671572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90838319" y3="-0.97476274" z3="1.18947426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84666785" y3="-0.32380333" z3="1.52251497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37233442" y3="0.54847299" z3="1.2233914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45264241" y3="1.45270003" z3="-0.40042595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97929442" y3="-0.70831277" z3="1.39489289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35223065" y3="1.7373241" z3="2.67150842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88211568" y3="-0.96710703" z3="2.08882023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65183097" y3="-0.3552765" z3="3.34821927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21329326" y3="0.76530533" z3="-1.22954085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32131712" y3="2.24336303" z3="-0.39424648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43310606" y3="1.93651946" z3="-0.55919232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01090381" y3="-1.07554088" z3="2.4340257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95115505" y3="-0.24454918" z3="1.15536553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85331108" y3="-1.54808167" z3="0.69268069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41201885" y3="1.19431913" z3="3.63211077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59189496" y3="2.31679242" z3="2.6697738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18917405" y3="2.46055987" z3="2.62516934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7892734" y3="-0.81288241" z3="3.85880552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56619795" y3="-0.52987449" z3="3.93091398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48078332" y3="0.72719457" z3="3.22954709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83766206" y3="-0.70077159" z3="0.99220704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41628068" y3="-2.02931272" z3="0.85487215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76411423" y3="-2.67585839" z3="1.89749318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55004553" y3="-1.9808529" z3="3.08395965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02362642" y3="-0.68674693" z3="3.27789877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67568647" y3="-0.05371042" z3="2.22440989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52483089" y3="-2.52853031" z3="-0.10939445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37135012" y3="-3.68595189" z3="1.7749454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68829104" y3="-2.58151592" z3="4.10719288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83741127" y3="-0.17568551" z3="4.22298439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0150269" y3="0.97938642" z3="2.33882414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79295367" y3="0.46649522" z3="-4.28393028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77466777" y3="-0.50151202" z3="-4.46450551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42969142" y3="-1.69337486" z3="-5.09154618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14338399" y3="-1.92506492" z3="-5.57048997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83110492" y3="-0.95410468" z3="-5.3703953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03492704" y3="1.39005389" z3="-3.75270582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79061157" y3="-0.35140601" z3="-4.10361186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44348954" y3="-2.73998104" z3="-5.23001427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08561331" y3="-2.86557134" z3="-6.07282287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85264854" y3="-1.14013932" z3="-5.70845385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35509038" y3="-1.88733715" z3="5.04751771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31534916" y3="-3.72383735" z3="3.93982924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22351686" y3="-3.64156992" z3="-6.00967832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44376858" y3="-2.65226674" z3="-4.5474953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07221772" y3="1.1645941" z3="-1.48852824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11352201" y3="1.55225656" z3="-2.46942867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44156644" y3="1.4929904" z3="-1.68449951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85396804" y3="2.15612032" z3="-2.81428361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16628112" y3="1.19636403" z3="-0.91995904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91090178" y3="2.39812643" z3="-2.95688645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57625853" y3="2.21922417" z3="-3.63796876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90839578" y3="2.51241942" z3="-3.80560989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85652844" y3="2.49031766" z3="-4.41384456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24171776" y3="3.0191655" z3="-4.71573796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40836965" y3="3.1518264" z3="-3.34061656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29482874" y3="3.56308029" z3="-4.13101763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21568666" y3="4.16391441" z3="-2.74811591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96614881" y3="5.49672612" z3="-2.97542977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0426512" y3="3.8763095" z3="-2.09700057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6022497" y3="6.25353598" z3="-2.5067686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07146722" y3="4.94876402" z3="-4.3606521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89143304" y3="5.89884609" z3="-3.80352674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22107869" y3="5.24563731" z3="-4.98238155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70774239" y3="6.9622971" z3="-3.98324249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48265732" y3="-2.20164457" z3="-0.29165704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45320776" y3="-2.99303455" z3="-1.05964957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01049817" y3="-2.58507919" z3="0.59625717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09777185" y3="-1.38137973" z3="-0.70794639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18229841" y3="-1.42425944" z3="-1.14398324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31641654" y3="-0.38116802" z3="-1.48641298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10538358" y3="-1.55373077" z3="-0.94194193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42687784" y3="-2.07412915" z3="-1.99773641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3384,.0552,-.1907;7.3837,.1715,.421;6.6456,.445,-.3392;4.7301,1.2374,-2.2631;4.388,.4384,-1.1844;2.7317,.846,-3.664;3.6372,1.7485,-3.1386;1.3874,2.5899,-4.6239;1.5648,1.2501,-4.3778;.5091,2.9246,-5.1848;2.9264,-.4841,-3.4408;3.0974,.0501,-1.0022;2.4006,-1.0949,-2.0003;.929,-.9638,-1.8287;3.1024,-2.4193,-1.8432;-.1445,-3.6161,.6749;-.0137,-5.2445,-4.7449;-.2428,-4.9895,-3.7066;-.8419,-4.3055,-1.0858;.7812,-4.5809,-2.8539;-1.5587,-5.0823,-3.2489;-1.8592,-4.7349,-1.9341;.4937,-4.2539,-1.5271;1.814,-4.4979,-3.2007;-2.3571,-5.3961,-3.9249;-2.8957,-4.7756,-1.5909;-1.0325,-3.8602,.2359;-2.1729,-3.6508,.8813;-3.0602,-4.1135,.4463;-2.1683,-3.5184,2.3484;-2.2273,-3.3391,5.1466;-3.364,-3.7264,3.0512;-1.002,-3.2272,3.0709;-1.0288,-3.1379,4.4596;-3.3925,-3.639,4.4402;-4.2783,-3.9666,2.5024;-.0428,-3.0915,2.5668;-.1001,-2.931,4.9986;-4.3301,-3.8125,4.9748;-2.2478,-3.2772,6.2383;1.4131,-3.8893,-.6224;2.1726,-3.3856,-1.0742;.5234,.2453,-4.7122;-3.0847,-1.7234,.0267;-2.9084,-.9748,1.1895;-1.8467,-.3238,1.5225;-.3723,.5485,1.2234;-.4526,1.4527,-.4004;.9793,-.7083,1.3949;-.3522,1.7373,2.6715;-3.8821,-.9671,2.0888;-3.6518,-.3553,3.3482;-.2133,.7653,-1.2295;.3213,2.2434,-.3942;-1.4331,1.9365,-.5592;1.0109,-1.0755,2.434;1.9512,-.2445,1.1554;.8533,-1.5481,.6927;-.412,1.1943,3.6321;.5919,2.3168,2.6698;-1.1892,2.4606,2.6252;-2.7893,-.8129,3.8588;-4.5662,-.5299,3.9309;-3.4808,.7272,3.2295;4.8377,-.7008,.9922;4.4163,-2.0293,.8549;3.7641,-2.6759,1.8975;3.55,-1.9809,3.084;4.0236,-.6867,3.2779;4.6757,-.0537,2.2244;4.5248,-2.5285,-.1094;3.3714,-3.686,1.7749;2.6883,-2.5815,4.1072;3.8374,-.1757,4.223;5.015,.9794,2.3388;-.793,.4665,-4.2839;-1.7747,-.5015,-4.4645;-1.4297,-1.6934,-5.0915;-.1434,-1.9251,-5.5705;.8311,-.9541,-5.3704;-1.0349,1.3901,-3.7527;-2.7906,-.3514,-4.1036;-2.4435,-2.74,-5.23;.0856,-2.8656,-6.0728;1.8526,-1.1401,-5.7085;2.3551,-1.8873,5.0475;2.3153,-3.7238,3.9398;-2.2235,-3.6416,-6.0097;-3.4438,-2.6523,-4.5475;7.0722,1.1646,-1.4885;6.1135,1.5523,-2.4694;8.4416,1.493,-1.6845;8.854,2.1561,-2.8143;9.1663,1.1964,-.92;9.9109,2.3981,-2.9569;6.5763,2.2192,-3.638;7.9084,2.5124,-3.8056;5.8565,2.4903,-4.4138;8.2417,3.0192,-4.7157;3.4084,3.1518,-3.3406;2.2948,3.5631,-4.131;4.2157,4.1639,-2.7481;3.9661,5.4967,-2.9754;5.0427,3.8763,-2.097;4.6022,6.2535,-2.5068;2.0715,4.9488,-4.3607;2.8914,5.8988,-3.8035;1.2211,5.2456,-4.9824;2.7077,6.9623,-3.9832;-4.4827,-2.2016,-.2917;-4.4532,-2.993,-1.0596;-5.0105,-2.5851,.5963;-5.0978,-1.3814,-.7079;-2.1823,-1.4243,-1.144;-2.3164,-.3812,-1.4864;-1.1054,-1.5537,-.9419;-2.4269,-2.0741,-1.9977;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650400926777</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003359390769 0.000558871868 0.018890929703 0.005336002497</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030292900 -0.002000745 0.000161191 0.000177960 0.000215071 0.000314266 0.000340937 0.000375804 0.000526984 0.000579759 0.000759581 0.000790520 0.000837802 0.000927456 0.000960317 0.001106130 0.001148870 0.001205817 0.001313229 0.001356318 0.001548506 0.001643095 0.001757829 0.001931055 0.002033576 0.002247609 0.002403070 0.002638996 0.002879828 0.003243684 0.003321636 0.003809550 0.003928546 0.004104228 0.005115991 0.005298069 0.005492031 0.005881594 0.006283055 0.006533890 0.007156536 0.007278732 0.007855330 0.008051026 0.008677505 0.009046550 0.009479074 0.009864906 0.010092089 0.010950811 0.011679702 0.012269614 0.012860798 0.013285380 0.013867841 0.014611098 0.014973109 0.015148264 0.015313938 0.015514633 0.016167882 0.016816878 0.018004020 0.018221378 0.018786969 0.019177596 0.019903964 0.020934311 0.021284219 0.021993692 0.022815033 0.024168662 0.024401600 0.025868505 0.026363301 0.026898984 0.028303961 0.028785865 0.030728770 0.031450752 0.032144475 0.033398757 0.033769053 0.035051461 0.037329954 0.038092486 0.039197452 0.039288067 0.040798762 0.043263927 0.043872782 0.043957322 0.045401466 0.048368797 0.049096311 0.049510428 0.050165633 0.050986247 0.052121173 0.052332483 0.052391309 0.052614287 0.053545801 0.054052906 0.054680387 0.055094004 0.055258266 0.056052886 0.056366794 0.056479418 0.057141981 0.058453229 0.059494973 0.060648828 0.061158908 0.061929155 0.061995311 0.062341239 0.064902014 0.065717610 0.065862116 0.065979023 0.067497198 0.071876581 0.073787391 0.074815695 0.076916327 0.080586217 0.083636216 0.085034207 0.085729818 0.086338571 0.087447020 0.089737998 0.090783625 0.093574732 0.094507793 0.095564139 0.095830838 0.097387024 0.097415565 0.098215592 0.099237951 0.099663546 0.099956621 0.100862605 0.101500523 0.102423500 0.103003991 0.103743382 0.104483263 0.106319307 0.106788103 0.107121185 0.108927253 0.109693346 0.110567421 0.112267198 0.113178637 0.114036614 0.117319752 0.118646474 0.119455457 0.121172138 0.123433663 0.125062591 0.126021037 0.130535877 0.131596680 0.134806374 0.141672300 0.142392610 0.145113652 0.145928012 0.146624589 0.148259271 0.150029031 0.151495374 0.152913118 0.158719206 0.160232453 0.172158498 0.172929538 0.175688728 0.182745753 0.183397365 0.186261589 0.187824941 0.191114243 0.193126712 0.196563655 0.197826891 0.202023819 0.204789819 0.206752942 0.209612970 0.209781454 0.212687603 0.213185186 0.216469508 0.218112820 0.224211843 0.224987187 0.229778155 0.233723696 0.234344026 0.234954127 0.243662160 0.254380776 0.256530184 0.260613496 0.265439779 0.278372194 0.282230201 0.286003545 0.288404900 0.292455759 0.299297842 0.304223943 0.305017036 0.305856044 0.313062550 0.314638839 0.321549524 0.322150615 0.329234317 0.344744289 0.347987927 0.350556675 0.350819894 0.354378337 0.360808331 0.361590783 0.377059518 0.377762081 0.388601186 0.408277309 0.421819789 0.425949375 0.450481104 0.466263819 0.468632489 0.475619238 0.480386490 0.480889600 0.487242557 0.502356340 0.508532726 0.533405238 0.564618905 0.567214200 0.585006984 0.592155300 0.597076884 0.603235080 0.637031557 0.641307666 0.644308129 0.665792198 0.672412914 0.683722228 0.685053684 0.691238285 0.697919914 0.703817339 0.713438117 0.723332584 0.738686728 0.749934090 0.759284338 0.771848998 0.776661673 0.805237350 0.809013069 0.812645987 0.813514832 0.820025895 0.820809538 0.829219110 0.830734195 0.831555348 0.841075324 0.844878803 0.844999310 0.850748510 0.857525737 0.863525506 0.864620907 0.870629825 0.873992189 0.883331911 0.887418584 0.891608141 0.895822220 0.917923717 0.922140454 0.930476534 0.932276051 0.963808451 0.975207705 0.983834407 0.999128912 1.010906286 1.024238762 1.039846452 1.047492345 1.054020781 1.060249932 1.085342986 1.086075632 1.096485505 1.104756320 1.111171588 1.112226948 1.122724391 1.123598382 1.134997152 1.138981090 1.170339662 1.170620287 1.179024124 1.185496107 1.194063363 1.212585609 1.220028076 1.264767182 1.295638120 1.313474891 1.323905839 1.324783142 1.326598545 1.328885498 1.332952944 1.341173029 1.341857349 1.355406526 1.374678603 1.380361369 1.380927221 1.387623329 1.418404339 1.419235145 1.550998378 1.659955679 1.772109423</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">70</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33847315" y3="0.05142746" z3="-0.19013442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.383553" y3="0.17135722" z3="0.42179212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64485972" y3="0.44449336" z3="-0.33798644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72755892" y3="1.23615504" z3="-2.26039065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38725741" y3="0.43407014" z3="-1.183248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72931923" y3="0.84319981" z3="-3.66219762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63293973" y3="1.7470751" z3="-3.13408607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3810022" y3="2.5872831" z3="-4.61673281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56164569" y3="1.24584744" z3="-4.37581031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50223609" y3="2.92165682" z3="-5.17683356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92666605" y3="-0.48698871" z3="-3.44168128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09734829" y3="0.04290662" z3="-1.00169924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40194935" y3="-1.10114964" z3="-2.00212285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93011793" y3="-0.971631" z3="-1.83034371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1048547" y3="-2.42512949" z3="-1.84700008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14316932" y3="-3.61354948" z3="0.67313551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01361199" y3="-5.25307854" z3="-4.74333526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24260911" y3="-4.99527161" z3="-3.70575473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84134675" y3="-4.30493867" z3="-1.0865095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78204962" y3="-4.58825109" z3="-2.8531007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55913323" y3="-5.08332123" z3="-3.24874662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85927611" y3="-4.73285451" z3="-1.93476974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49458906" y3="-4.25763084" z3="-1.52723113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81541387" y3="-4.50910639" z3="-3.1992005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35809827" y3="-5.39594393" z3="-3.92466976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89615248" y3="-4.77001492" z3="-1.59210454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03141026" y3="-3.85722916" z3="0.23449877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17196026" y3="-3.64560901" z3="0.8795868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05938788" y3="-4.10802929" z3="0.4448931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16748869" y3="-3.51245892" z3="2.34677838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22602411" y3="-3.33178911" z3="5.14499812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36454265" y3="-3.7162993" z3="3.04927317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9996694" y3="-3.22460535" z3="3.06950803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02626792" y3="-3.13467848" z3="4.45823311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39292157" y3="-3.62810562" z3="4.43829647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28027685" y3="-3.95347655" z3="2.50016463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03943786" y3="-3.09249454" z3="2.56564203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09656449" y3="-2.9306039" z3="4.99741708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33167302" y3="-3.79838896" z3="4.97282282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24640596" y3="-3.2695418" z3="6.23663781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41464801" y3="-3.89356858" z3="-0.62290977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17492704" y3="-3.39180494" z3="-1.07563441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52151268" y3="0.23962039" z3="-4.71395041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08181185" y3="-1.71830122" z3="0.0246182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90399113" y3="-0.96734977" z3="1.18592375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84255711" y3="-0.31564493" z3="1.51708951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36389112" y3="0.55273827" z3="1.21703786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44241172" y3="1.45280471" z3="-0.40876614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98407668" y3="-0.70784484" z3="1.39397133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34662635" y3="1.74384559" z3="2.66228121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8770624" y3="-0.95813758" z3="2.0857582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64582063" y3="-0.34573526" z3="3.34446261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20819824" y3="0.76178118" z3="-1.23715085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33447664" y3="2.24002032" z3="-0.40561853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42098448" y3="1.93945493" z3="-0.56648282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01164617" y3="-1.0735879" z3="2.43391612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95818604" y3="-0.24687718" z3="1.15631547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8570769" y3="-1.54852761" z3="0.69266639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39805536" y3="1.20518711" z3="3.62423924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58205621" y3="2.33568335" z3="2.65943755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19090483" y3="2.44840159" z3="2.61487613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78379466" y3="-0.80394577" z3="3.85524137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56006562" y3="-0.51884961" z3="3.92741118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47360924" y3="0.73639361" z3="3.22494816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83893045" y3="-0.70662848" z3="0.99188716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41600464" y3="-2.03458787" z3="0.85224801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76365077" y3="-2.68227861" z3="1.89400134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55153225" y3="-1.98921667" z3="3.08219031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0272378" y3="-0.69609158" z3="3.27857553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67905577" y3="-0.06172834" z3="2.2257279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52334852" y3="-2.53218977" z3="-0.11314611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.369511" y3="-3.69172141" z3="1.76962264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6896987" y3="-2.59062555" z3="4.10489005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84253088" y3="-0.18666862" z3="4.224988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.019496" y3="0.97093273" z3="2.34189855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79519314" y3="0.46152123" z3="-4.28985893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77579787" y3="-0.50396526" z3="-4.46466767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42912225" y3="-1.69608347" z3="-5.08956865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14357563" y3="-1.92852911" z3="-5.56823348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83029977" y3="-0.95971244" z3="-5.36957017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0388003" y3="1.38523392" z3="-3.7583763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79649009" y3="-0.35952529" z3="-4.10369221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44207591" y3="-2.7447449" z3="-5.23023864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08536972" y3="-2.86895709" z3="-6.06959985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85150233" y3="-1.1469248" z3="-5.70414212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36148329" y3="-1.89874472" z3="5.04918187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31190634" y3="-3.73113869" z3="3.93345655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21990643" y3="-3.64522524" z3="-6.01121758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44407544" y3="-2.66081441" z3="-4.5471702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06991227" y3="1.16694133" z3="-1.48612817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11038636" y3="1.55426732" z3="-2.46640379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4384999" y3="1.4985509" z3="-1.68144282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84952975" y3="2.16437688" z3="-2.81009617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16375998" y3="1.20220137" z3="-0.91732119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90587" y3="2.40880843" z3="-2.95219504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57181112" y3="2.22412272" z3="-3.63382197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90328172" y3="2.52027815" z3="-3.80090633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85160676" y3="2.49483775" z3="-4.40939614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23559784" y3="3.02909359" z3="-4.71020242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40090401" y3="3.15082411" z3="-3.33199045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.286134" y3="3.56204064" z3="-4.12065253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20730111" y3="4.16268546" z3="-2.73853294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95656434" y3="5.49475764" z3="-2.96466632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0353524" y3="3.87498562" z3="-2.08882916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59278477" y3="6.25072081" z3="-2.49652364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06114692" y3="4.94735936" z3="-4.34858071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88101364" y3="5.89667977" z3="-3.79177156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21065903" y3="5.24351302" z3="-4.9704138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6975469" y3="6.95891373" z3="-3.97187651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48093255" y3="-2.19561388" z3="-0.29190416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45313129" y3="-2.98866444" z3="-1.05859468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00848954" y3="-2.57700269" z3="0.59719264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09588777" y3="-1.37587213" z3="-0.70944598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18020194" y3="-1.4217096" z3="-1.14733589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31551071" y3="-0.38044106" z3="-1.49259371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10398693" y3="-1.54910499" z3="-0.94514838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42460737" y3="-2.07352684" z3="-1.99931319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3385,.0514,-.1901;7.3836,.1714,.4218;6.6449,.4445,-.338;4.7276,1.2362,-2.2604;4.3873,.4341,-1.1832;2.7293,.8432,-3.6622;3.6329,1.7471,-3.1341;1.381,2.5873,-4.6167;1.5616,1.2458,-4.3758;.5022,2.9217,-5.1768;2.9267,-.487,-3.4417;3.0973,.0429,-1.0017;2.4019,-1.1011,-2.0021;.9301,-.9716,-1.8303;3.1049,-2.4251,-1.847;-.1432,-3.6135,.6731;-.0136,-5.2531,-4.7433;-.2426,-4.9953,-3.7058;-.8413,-4.3049,-1.0865;.782,-4.5883,-2.8531;-1.5591,-5.0833,-3.2487;-1.8593,-4.7329,-1.9348;.4946,-4.2576,-1.5272;1.8154,-4.5091,-3.1992;-2.3581,-5.3959,-3.9247;-2.8962,-4.77,-1.5921;-1.0314,-3.8572,.2345;-2.172,-3.6456,.8796;-3.0594,-4.108,.4449;-2.1675,-3.5125,2.3468;-2.226,-3.3318,5.145;-3.3645,-3.7163,3.0493;-.9997,-3.2246,3.0695;-1.0263,-3.1347,4.4582;-3.3929,-3.6281,4.4383;-4.2803,-3.9535,2.5002;-.0394,-3.0925,2.5656;-.0966,-2.9306,4.9974;-4.3317,-3.7984,4.9728;-2.2464,-3.2695,6.2366;1.4146,-3.8936,-.6229;2.1749,-3.3918,-1.0756;.5215,.2396,-4.714;-3.0818,-1.7183,.0246;-2.904,-.9673,1.1859;-1.8426,-.3156,1.5171;-.3639,.5527,1.217;-.4424,1.4528,-.4088;.9841,-.7078,1.394;-.3466,1.7438,2.6623;-3.8771,-.9581,2.0858;-3.6458,-.3457,3.3445;-.2082,.7618,-1.2372;.3345,2.24,-.4056;-1.421,1.9395,-.5665;1.0116,-1.0736,2.4339;1.9582,-.2469,1.1563;.8571,-1.5485,.6927;-.3981,1.2052,3.6242;.5821,2.3357,2.6594;-1.1909,2.4484,2.6149;-2.7838,-.8039,3.8552;-4.5601,-.5188,3.9274;-3.4736,.7364,3.2249;4.8389,-.7066,.9919;4.416,-2.0346,.8522;3.7637,-2.6823,1.894;3.5515,-1.9892,3.0822;4.0272,-.6961,3.2786;4.6791,-.0617,2.2257;4.5233,-2.5322,-.1131;3.3695,-3.6917,1.7696;2.6897,-2.5906,4.1049;3.8425,-.1867,4.225;5.0195,.9709,2.3419;-.7952,.4615,-4.2899;-1.7758,-.504,-4.4647;-1.4291,-1.6961,-5.0896;-.1436,-1.9285,-5.5682;.8303,-.9597,-5.3696;-1.0388,1.3852,-3.7584;-2.7965,-.3595,-4.1037;-2.4421,-2.7447,-5.2302;.0854,-2.869,-6.0696;1.8515,-1.1469,-5.7041;2.3615,-1.8987,5.0492;2.3119,-3.7311,3.9335;-2.2199,-3.6452,-6.0112;-3.4441,-2.6608,-4.5472;7.0699,1.1669,-1.4861;6.1104,1.5543,-2.4664;8.4385,1.4986,-1.6814;8.8495,2.1644,-2.8101;9.1638,1.2022,-.9173;9.9059,2.4088,-2.9522;6.5718,2.2241,-3.6338;7.9033,2.5203,-3.8009;5.8516,2.4948,-4.4094;8.2356,3.0291,-4.7102;3.4009,3.1508,-3.332;2.2861,3.562,-4.1207;4.2073,4.1627,-2.7385;3.9566,5.4948,-2.9647;5.0354,3.875,-2.0888;4.5928,6.2507,-2.4965;2.0611,4.9474,-4.3486;2.881,5.8967,-3.7918;1.2107,5.2435,-4.9704;2.6975,6.9589,-3.9719;-4.4809,-2.1956,-.2919;-4.4531,-2.9887,-1.0586;-5.0085,-2.577,.5972;-5.0959,-1.3759,-.7094;-2.1802,-1.4217,-1.1473;-2.3155,-.3804,-1.4926;-1.104,-1.5491,-.9451;-2.4246,-2.0735,-1.9993;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650394488841</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003758830965 0.000592355207 0.026970976412 0.005339479923</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030304480 -0.001950600 0.000162818 0.000180455 0.000215016 0.000314387 0.000343635 0.000375560 0.000527485 0.000579849 0.000761078 0.000790971 0.000837817 0.000928562 0.000966543 0.001111475 0.001149457 0.001208367 0.001315044 0.001356404 0.001581449 0.001651631 0.001805141 0.001949719 0.002111449 0.002253008 0.002589865 0.002655131 0.002890435 0.003243739 0.003337700 0.003833163 0.003970883 0.004110207 0.005117083 0.005311809 0.005492143 0.005915167 0.006289697 0.006580059 0.007213784 0.007315915 0.007858047 0.008111242 0.008694695 0.009046397 0.009497372 0.009866569 0.010100270 0.010959311 0.011708809 0.012287927 0.012863991 0.013286759 0.013871780 0.014618319 0.014979535 0.015157250 0.015312906 0.015518261 0.016167926 0.016816640 0.018007733 0.018240822 0.018786644 0.019357921 0.019906917 0.020934449 0.021283634 0.021999143 0.022816533 0.024215033 0.024418392 0.025869460 0.026365512 0.026911608 0.028316767 0.028785840 0.030756564 0.031475293 0.032172441 0.033427522 0.033814297 0.035051771 0.037389074 0.038136505 0.039200830 0.039386364 0.040802087 0.043266863 0.043868937 0.043957607 0.045404052 0.048371298 0.049133691 0.049559208 0.050187785 0.050986302 0.052121588 0.052332530 0.052391412 0.052619432 0.053547737 0.054054506 0.054683776 0.055118348 0.055450686 0.056081244 0.056367350 0.056482849 0.057144036 0.058465713 0.059498052 0.060654983 0.061160507 0.061961446 0.062019555 0.062342721 0.064901997 0.065717866 0.065864847 0.065977495 0.067496795 0.071877886 0.073788462 0.074815891 0.076916807 0.080587892 0.083637027 0.085034112 0.085736663 0.086340110 0.087455122 0.089746745 0.090788098 0.093589736 0.094508922 0.095564136 0.095831508 0.097389937 0.097443382 0.098215619 0.099241251 0.099716842 0.100046243 0.100963328 0.101500454 0.102453867 0.103003930 0.103746330 0.104500939 0.106320231 0.106824474 0.107123683 0.108927561 0.109694379 0.110567335 0.112281294 0.113178847 0.114044532 0.117321806 0.118646616 0.119470756 0.121181406 0.123432783 0.125062520 0.126021523 0.130571358 0.131616821 0.134807508 0.141672099 0.142392575 0.145113846 0.146008091 0.146645911 0.148601924 0.150114560 0.151500201 0.152941903 0.158737343 0.160250559 0.172158978 0.172929587 0.175688531 0.182746202 0.183402034 0.186306150 0.187864469 0.191113750 0.193127757 0.196563745 0.197829918 0.202223928 0.204800496 0.206753194 0.209613988 0.209793964 0.212717853 0.213182497 0.216470446 0.218115640 0.224212964 0.224992758 0.229779399 0.233727604 0.234344180 0.234955928 0.243675498 0.254415875 0.256530132 0.260685858 0.265574620 0.278376782 0.282230997 0.286010688 0.288495498 0.292484211 0.299305581 0.304223997 0.305034316 0.305969284 0.313067160 0.314645785 0.321563633 0.322152021 0.329267722 0.345343459 0.348036778 0.350678381 0.351883227 0.354380011 0.360808643 0.361615554 0.377063881 0.377807572 0.388841280 0.408405492 0.421826437 0.425956677 0.450483323 0.466271462 0.468632721 0.475619469 0.480414367 0.480926611 0.487279899 0.502469547 0.508532999 0.533410458 0.564624726 0.567228976 0.585132674 0.592155299 0.597919494 0.603235660 0.637042214 0.641350317 0.644328331 0.666887831 0.672412996 0.683722296 0.685107403 0.691238268 0.697965544 0.703817355 0.713440349 0.723353542 0.738686816 0.749934100 0.759285852 0.771850366 0.776661944 0.805348031 0.809117039 0.812647244 0.814129844 0.820048140 0.820997464 0.829296268 0.830773816 0.831563799 0.841075536 0.844900241 0.845279615 0.850987936 0.857526252 0.863541000 0.864621358 0.870631500 0.874070181 0.883334834 0.887418719 0.891616239 0.895839696 0.917924148 0.922143449 0.930491605 0.932279358 0.963809702 0.975207758 0.983851249 0.999134163 1.011024064 1.024247257 1.039885710 1.047542038 1.054070049 1.060305475 1.085343029 1.086083010 1.096499986 1.104756510 1.111199476 1.112233162 1.122726600 1.123600386 1.134997458 1.138984727 1.170340078 1.170622610 1.179024893 1.185501610 1.194063361 1.213114971 1.220036535 1.264791911 1.295638797 1.313479382 1.323960556 1.325154928 1.327283403 1.328903461 1.332962178 1.341174699 1.341882910 1.355414203 1.374678628 1.380363801 1.380927865 1.387647067 1.418411487 1.419276978 1.550998338 1.659955570 1.772138158</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">71</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33821312" y3="0.04780072" z3="-0.18987756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38297893" y3="0.17161048" z3="0.42263036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6437519" y3="0.44395685" z3="-0.33696457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72498555" y3="1.23387406" z3="-2.25859449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38626316" y3="0.42966021" z3="-1.18274796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72730291" y3="0.84017338" z3="-3.66099992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62971231" y3="1.74411429" z3="-3.13173758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37661715" y3="2.58320805" z3="-4.61282738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55873932" y3="1.24245816" z3="-4.37338055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49679738" y3="2.91768392" z3="-5.17127714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92679716" y3="-0.48993358" z3="-3.44260595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09712261" y3="0.035957" z3="-1.00194871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40285927" y3="-1.10716222" z3="-2.00415569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93093451" y3="-0.9793917" z3="-1.83193907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10675842" y3="-2.43086687" z3="-1.85127205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14186753" y3="-3.6121941" z3="0.67117672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01318531" y3="-5.26062301" z3="-4.74218991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24210236" y3="-5.00090621" z3="-3.70514032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8408249" y3="-4.30533559" z3="-1.08732127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78224452" y3="-4.59344086" z3="-2.85287647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55836361" y3="-5.08687177" z3="-3.24836465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85864696" y3="-4.7334409" z3="-1.935251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49497446" y3="-4.26060104" z3="-1.52765937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81535421" y3="-4.51567404" z3="-3.19855162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35697512" y3="-5.40013016" z3="-3.92393786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89551332" y3="-4.768469" z3="-1.5930654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.030445" y3="-3.85550039" z3="0.23301762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17048752" y3="-3.64241218" z3="0.87824088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05838094" y3="-4.10403692" z3="0.4440367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16572192" y3="-3.50752591" z3="2.34527994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22517945" y3="-3.32341162" z3="5.14315595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36372235" y3="-3.70654231" z3="3.04759119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99726317" y3="-3.22291439" z3="3.06809242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02423149" y3="-3.13156329" z3="4.45670193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39254138" y3="-3.61664749" z3="4.43642216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27964096" y3="-3.94155183" z3="2.49848574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03605259" y3="-3.09519006" z3="2.56468403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09399523" y3="-2.93064152" z3="4.99611956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33233324" y3="-3.78270445" z3="4.97062476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24577711" y3="-3.2601352" z3="6.23470369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41544583" y3="-3.89677078" z3="-0.62367861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1760647" y3="-3.39668838" z3="-1.07721508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51956561" y3="0.2367356" z3="-4.71079234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07963509" y3="-1.71429771" z3="0.02175047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90099971" y3="-0.96283599" z3="1.18206332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83841305" y3="-0.31235085" z3="1.5120681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36150944" y3="0.55477556" z3="1.21239664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43423792" y3="1.45153588" z3="-0.41609661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98606072" y3="-0.70492764" z3="1.39493543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34424778" y3="1.75175333" z3="2.65345253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87358865" y3="-0.95109662" z3="2.0825102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64064164" y3="-0.33650738" z3="3.33992933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20093332" y3="0.75913142" z3="-1.24226753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34566423" y3="2.23564636" z3="-0.41381122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41047156" y3="1.94239056" z3="-0.57674758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01184681" y3="-1.06938363" z3="2.43524198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96052842" y3="-0.24530545" z3="1.15816671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86029634" y3="-1.54630715" z3="0.6944857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40272177" y3="1.21609677" z3="3.61799499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60094048" y3="2.33169574" z3="2.64649453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18153997" y3="2.47537257" z3="2.60226552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77877605" y3="-0.79451214" z3="3.85095344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55471545" y3="-0.50756879" z3="3.92402064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46711118" y3="0.74522861" z3="3.21828749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84008405" y3="-0.71237575" z3="0.99137907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41484419" y3="-2.0394302" z3="0.84923045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76251243" y3="-2.68832957" z3="1.89023973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55304298" y3="-1.99751511" z3="3.08032857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03166716" y3="-0.70579782" z3="3.27934286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6832397" y3="-0.07008529" z3="2.22713428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.520106" y3="-2.53512124" z3="-0.11755192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36627692" y3="-3.69678475" z3="1.76379359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69155372" y3="-2.59965282" z3="4.10289252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8493113" y3="-0.19828353" z3="4.22736605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02580748" y3="0.96174532" z3="2.34555002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79784289" y3="0.45803706" z3="-4.28704673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77807559" y3="-0.50984101" z3="-4.46582763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43030396" y3="-1.70201551" z3="-5.08979737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1433873" y3="-1.93375735" z3="-5.56578255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82967327" y3="-0.96305015" z3="-5.36527006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04337562" y3="1.38205788" z3="-3.7570796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79534192" y3="-0.36072187" z3="-4.10708881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44273445" y3="-2.75021056" z3="-5.23190413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08654628" y3="-2.87452447" z3="-6.06548952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85167929" y3="-1.14978294" z3="-5.69948442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36693634" y3="-1.9099096" z3="5.0497807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31055939" y3="-3.73849972" z3="3.92890153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22118562" y3="-3.64953794" z3="-6.01411163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44325789" y3="-2.6658531" z3="-4.54834521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06739922" y3="1.16878315" z3="-1.48401521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1071179" y3="1.55536391" z3="-2.46381964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43528205" y3="1.50378918" z3="-1.6786743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84488373" y3="2.17237991" z3="-2.80619097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1611787" y3="1.20780653" z3="-0.91500977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90070926" y3="2.4194085" z3="-2.9478142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56706121" y3="2.2282785" z3="-3.63002413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89790668" y3="2.52789039" z3="-3.79645395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84623918" y3="2.49888198" z3="-4.40505976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22911592" y3="3.03911619" z3="-4.70481891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39584393" y3="3.14752618" z3="-3.32735534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28048626" y3="3.55804022" z3="-4.11547865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19986776" y3="4.16016624" z3="-2.730875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94548796" y3="5.4931785" z3="-2.95244632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02820472" y3="3.87291083" z3="-2.0813905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57961413" y3="6.25011848" z3="-2.48149198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05178447" y3="4.94426921" z3="-4.33865573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86882544" y3="5.89507621" z3="-3.77809997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20000256" y3="5.24073416" z3="-4.95863518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68136994" y3="6.95875363" z3="-3.95344187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47909609" y3="-2.1904615" z3="-0.29366939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4523614" y3="-2.98445887" z3="-1.05922846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00651975" y3="-2.57003683" z3="0.5961478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09342559" y3="-1.37040701" z3="-0.7116912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1779927" y3="-1.41978874" z3="-1.1504214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31297591" y3="-0.37882025" z3="-1.4977889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10122349" y3="-1.54782249" z3="-0.94819146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42248403" y3="-2.07325808" z3="-2.00128983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3382,.0478,-.1899;7.383,.1716,.4226;6.6438,.444,-.337;4.725,1.2339,-2.2586;4.3863,.4297,-1.1827;2.7273,.8402,-3.661;3.6297,1.7441,-3.1317;1.3766,2.5832,-4.6128;1.5587,1.2425,-4.3734;.4968,2.9177,-5.1713;2.9268,-.4899,-3.4426;3.0971,.036,-1.0019;2.4029,-1.1072,-2.0042;.9309,-.9794,-1.8319;3.1068,-2.4309,-1.8513;-.1419,-3.6122,.6712;-.0132,-5.2606,-4.7422;-.2421,-5.0009,-3.7051;-.8408,-4.3053,-1.0873;.7822,-4.5934,-2.8529;-1.5584,-5.0869,-3.2484;-1.8586,-4.7334,-1.9353;.495,-4.2606,-1.5277;1.8154,-4.5157,-3.1986;-2.357,-5.4001,-3.9239;-2.8955,-4.7685,-1.5931;-1.0304,-3.8555,.233;-2.1705,-3.6424,.8782;-3.0584,-4.104,.444;-2.1657,-3.5075,2.3453;-2.2252,-3.3234,5.1432;-3.3637,-3.7065,3.0476;-.9973,-3.2229,3.0681;-1.0242,-3.1316,4.4567;-3.3925,-3.6166,4.4364;-4.2796,-3.9416,2.4985;-.0361,-3.0952,2.5647;-.094,-2.9306,4.9961;-4.3323,-3.7827,4.9706;-2.2458,-3.2601,6.2347;1.4154,-3.8968,-.6237;2.1761,-3.3967,-1.0772;.5196,.2367,-4.7108;-3.0796,-1.7143,.0218;-2.901,-.9628,1.1821;-1.8384,-.3124,1.5121;-.3615,.5548,1.2124;-.4342,1.4515,-.4161;.9861,-.7049,1.3949;-.3442,1.7518,2.6535;-3.8736,-.9511,2.0825;-3.6406,-.3365,3.3399;-.2009,.7591,-1.2423;.3457,2.2356,-.4138;-1.4105,1.9424,-.5767;1.0118,-1.0694,2.4352;1.9605,-.2453,1.1582;.8603,-1.5463,.6945;-.4027,1.2161,3.618;.6009,2.3317,2.6465;-1.1815,2.4754,2.6023;-2.7788,-.7945,3.851;-4.5547,-.5076,3.924;-3.4671,.7452,3.2183;4.8401,-.7124,.9914;4.4148,-2.0394,.8492;3.7625,-2.6883,1.8902;3.553,-1.9975,3.0803;4.0317,-.7058,3.2793;4.6832,-.0701,2.2271;4.5201,-2.5351,-.1176;3.3663,-3.6968,1.7638;2.6916,-2.5997,4.1029;3.8493,-.1983,4.2274;5.0258,.9617,2.3456;-.7978,.458,-4.287;-1.7781,-.5098,-4.4658;-1.4303,-1.702,-5.0898;-.1434,-1.9338,-5.5658;.8297,-.9631,-5.3653;-1.0434,1.3821,-3.7571;-2.7953,-.3607,-4.1071;-2.4427,-2.7502,-5.2319;.0865,-2.8745,-6.0655;1.8517,-1.1498,-5.6995;2.3669,-1.9099,5.0498;2.3106,-3.7385,3.9289;-2.2212,-3.6495,-6.0141;-3.4433,-2.6659,-4.5483;7.0674,1.1688,-1.484;6.1071,1.5554,-2.4638;8.4353,1.5038,-1.6787;8.8449,2.1724,-2.8062;9.1612,1.2078,-.915;9.9007,2.4194,-2.9478;6.5671,2.2283,-3.63;7.8979,2.5279,-3.7965;5.8462,2.4989,-4.4051;8.2291,3.0391,-4.7048;3.3958,3.1475,-3.3274;2.2805,3.558,-4.1155;4.1999,4.1602,-2.7309;3.9455,5.4932,-2.9524;5.0282,3.8729,-2.0814;4.5796,6.2501,-2.4815;2.0518,4.9443,-4.3387;2.8688,5.8951,-3.7781;1.2,5.2407,-4.9586;2.6814,6.9588,-3.9534;-4.4791,-2.1905,-.2937;-4.4524,-2.9845,-1.0592;-5.0065,-2.57,.5961;-5.0934,-1.3704,-.7117;-2.178,-1.4198,-1.1504;-2.313,-.3788,-1.4978;-1.1012,-1.5478,-.9482;-2.4225,-2.0733,-2.0013;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650403360016</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003299210977 0.000473502278 0.018435422658 0.005340816863</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030314056 -0.001455783 0.000172665 0.000182060 0.000215550 0.000314352 0.000345531 0.000382916 0.000528214 0.000580324 0.000766217 0.000795001 0.000839591 0.000931880 0.000994041 0.001120807 0.001151615 0.001224825 0.001347022 0.001361008 0.001591970 0.001653684 0.001817962 0.001971479 0.002142497 0.002252854 0.002617864 0.002752790 0.002898313 0.003243944 0.003340516 0.003837299 0.004026508 0.004131311 0.005120699 0.005323226 0.005492678 0.005924343 0.006312647 0.006614688 0.007231001 0.007379407 0.007857791 0.008133003 0.008712667 0.009046997 0.009496952 0.009871349 0.010102982 0.010974244 0.011725026 0.012303073 0.012865087 0.013286887 0.013871512 0.014623880 0.014990149 0.015183282 0.015316588 0.015517913 0.016167753 0.016819584 0.018007694 0.018260991 0.018787278 0.019475303 0.019906641 0.020935189 0.021284607 0.021998411 0.022816354 0.024219252 0.024418623 0.025869379 0.026366739 0.026926348 0.028325512 0.028785804 0.030772817 0.031493334 0.032207500 0.033463582 0.033911129 0.035051775 0.037467102 0.038192344 0.039200775 0.039560036 0.040805431 0.043296586 0.043896542 0.043957689 0.045413315 0.048386564 0.049167453 0.049604416 0.050196327 0.050987432 0.052124614 0.052332541 0.052391442 0.052622825 0.053554664 0.054054592 0.054685330 0.055119559 0.055560484 0.056127284 0.056367891 0.056484582 0.057149465 0.058483759 0.059498839 0.060660006 0.061161093 0.061979674 0.062023565 0.062342787 0.064902601 0.065723571 0.065869108 0.065984331 0.067499516 0.071877707 0.073788287 0.074821174 0.076917947 0.080589629 0.083637741 0.085034056 0.085737256 0.086341559 0.087454218 0.089750049 0.090789873 0.093598600 0.094509482 0.095564494 0.095832228 0.097389865 0.097449087 0.098216512 0.099241034 0.099714071 0.100084750 0.101017276 0.101500766 0.102459532 0.103004025 0.103753127 0.104516332 0.106332805 0.106845450 0.107126529 0.108934196 0.109697188 0.110568025 0.112284544 0.113180501 0.114049192 0.117321605 0.118647015 0.119475098 0.121194587 0.123454718 0.125062614 0.126021363 0.130590438 0.131620824 0.134808787 0.141672170 0.142393761 0.145113744 0.146048658 0.146643630 0.148974438 0.150200649 0.151504124 0.152944654 0.158737142 0.160266257 0.172160090 0.172931537 0.175689318 0.182747622 0.183419806 0.186303264 0.187918544 0.191119272 0.193127443 0.196569870 0.197845951 0.202355024 0.204800265 0.206753343 0.209614899 0.209794304 0.212742301 0.213224433 0.216471880 0.218135786 0.224216581 0.224992504 0.229779337 0.233729488 0.234344383 0.234955885 0.243681079 0.254433602 0.256533183 0.260697138 0.265611025 0.278377321 0.282235965 0.286012616 0.288544867 0.292502283 0.299309882 0.304224641 0.305041463 0.306091781 0.313067027 0.314653327 0.321584219 0.322154646 0.329275926 0.345747043 0.348043534 0.350677947 0.353085992 0.354385819 0.360808639 0.361636163 0.377064873 0.377828094 0.388886303 0.408428675 0.421833518 0.425981147 0.450487373 0.466278454 0.468633359 0.475620052 0.480416523 0.480944508 0.487287730 0.502496613 0.508533531 0.533411657 0.564626253 0.567230858 0.585145437 0.592155298 0.598589433 0.603236351 0.637042721 0.641391298 0.644335257 0.668090938 0.672414248 0.683725877 0.685257477 0.691238492 0.697985787 0.703817419 0.713452877 0.723413488 0.738686852 0.749934218 0.759286194 0.771850787 0.776662639 0.805513688 0.809296735 0.812649767 0.814834929 0.820063952 0.821357890 0.829367673 0.830818818 0.831579124 0.841075521 0.844904103 0.845573970 0.851311441 0.857526299 0.863551190 0.864623213 0.870632010 0.874162600 0.883336960 0.887420435 0.891617449 0.895872493 0.917924519 0.922143932 0.930504958 0.932279625 0.963811357 0.975207771 0.983851156 0.999141853 1.011041099 1.024252553 1.039906326 1.047571634 1.054091797 1.060357279 1.085343491 1.086088105 1.096550361 1.104756641 1.111199637 1.112233140 1.122727100 1.123600755 1.134997717 1.138987436 1.170342969 1.170626249 1.179026028 1.185505825 1.194063447 1.213364932 1.220046397 1.264791384 1.295644406 1.313479764 1.324016761 1.325281692 1.327593627 1.328940372 1.332963745 1.341188967 1.341889831 1.355443006 1.374678668 1.380365201 1.380927621 1.387686598 1.418427526 1.419346063 1.550998460 1.659957408 1.772144396</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">72</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33841988" y3="0.04252574" z3="-0.19001648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38283908" y3="0.16906597" z3="0.42237522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64311048" y3="0.44132387" z3="-0.3366953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72271952" y3="1.2319291" z3="-2.25625245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38574188" y3="0.42478215" z3="-1.18194882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7246018" y3="0.83845827" z3="-3.65756714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62593798" y3="1.74265126" z3="-3.12721972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3698357" y3="2.58202692" z3="-4.60376266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55459195" y3="1.24074574" z3="-4.36736775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48973884" y3="2.91568648" z3="-5.16226909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92697173" y3="-0.49210298" z3="-3.44279016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09734944" y3="0.02887017" z3="-1.00139434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40411847" y3="-1.11321526" z3="-2.0055219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93210723" y3="-0.98709755" z3="-1.83269343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10914043" y3="-2.43651797" z3="-1.85512894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13993276" y3="-3.60894284" z3="0.66940246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01524216" y3="-5.27123319" z3="-4.74120331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24342738" y3="-5.00844569" z3="-3.70460234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.840084" y3="-4.30463401" z3="-1.08794435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78281302" y3="-4.60239426" z3="-2.85319169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56062988" y3="-5.08887415" z3="-3.24739859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85975808" y3="-4.73148239" z3="-1.9349358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49644253" y3="-4.26544698" z3="-1.52858031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81686394" y3="-4.52937116" z3="-3.19943085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36112563" y3="-5.40065807" z3="-3.92222442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89722914" y3="-4.76219747" z3="-1.59269408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02889671" y3="-3.8513869" z3="0.23145357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16868207" y3="-3.6374713" z3="0.87670988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05689691" y3="-4.09889919" z3="0.44276756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16424727" y3="-3.50161479" z3="2.34355154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22445121" y3="-3.31520533" z3="5.14129443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36086694" y3="-3.70202114" z3="3.04599138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99743264" y3="-3.21494376" z3="3.06618684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02489757" y3="-3.12226825" z3="4.45470626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39010987" y3="-3.61085919" z3="4.43474067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2755116" y3="-3.9390969" z3="2.49712047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03764996" y3="-3.08613818" z3="2.56246753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09607857" y3="-2.91975421" z3="4.99416763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32861694" y3="-3.77822651" z3="4.96902757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24558953" y3="-3.25053436" z3="6.23272939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41872818" y3="-3.90281548" z3="-0.62547645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17871801" y3="-3.4033457" z3="-1.07977111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51678384" y3="0.23336617" z3="-4.70766701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0773066" y3="-1.70931263" z3="0.01937027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89676908" y3="-0.95574716" z3="1.1785575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8339345" y3="-0.3044054" z3="1.5063684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35339368" y3="0.56002804" z3="1.20630505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42412116" y3="1.4520528" z3="-0.42415416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9909391" y3="-0.70294476" z3="1.39498947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33715574" y3="1.76078634" z3="2.64418213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86859789" y3="-0.94269835" z3="2.07982165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63463937" y3="-0.32718372" z3="3.33647666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19706603" y3="0.75448438" z3="-1.24925861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36149503" y3="2.23153944" z3="-0.42566188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39818539" y3="1.94809206" z3="-0.58364906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01228955" y3="-1.06567427" z3="2.43620688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96705518" y3="-0.24515187" z3="1.16062016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8653662" y3="-1.54525678" z3="0.69556825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39312422" y3="1.22752722" z3="3.60956683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59460368" y3="2.35013116" z3="2.63972563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17987689" y3="2.46927111" z3="2.59001977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77298378" y3="-0.78592688" z3="3.8475827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54865447" y3="-0.49660366" z3="3.92097204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46017072" y3="0.75422651" z3="3.2136533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84146879" y3="-0.71929103" z3="0.99054929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4150067" y3="-2.04558078" z3="0.84752004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76275275" y3="-2.69498841" z3="1.88822613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55472853" y3="-2.0055088" z3="3.07893723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03487868" y3="-0.71483071" z3="3.27878352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68615727" y3="-0.07854761" z3="2.2268107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51929916" y3="-2.54026328" z3="-0.11954262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36545058" y3="-3.70270125" z3="1.7611267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69312586" y3="-2.60778817" z3="4.10131752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85354807" y3="-0.20837318" z3="4.22716355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02946359" y3="0.95266002" z3="2.34571203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80188828" y3="0.45393899" z3="-4.28800517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78103252" y3="-0.51439578" z3="-4.46964735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43085129" y3="-1.70666171" z3="-5.09263097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14278112" y3="-1.93780866" z3="-5.5652807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82929264" y3="-0.96624741" z3="-5.36262755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04801754" y3="1.37767613" z3="-3.75827288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80219121" y3="-0.36962054" z3="-4.11281797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44196245" y3="-2.75623024" z3="-5.2345828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08967167" y3="-2.87873516" z3="-6.06503182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85235602" y3="-1.15196346" z3="-5.69416294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37145604" y3="-1.91927869" z3="5.04998554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30893915" y3="-3.74524986" z3="3.9253637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21799994" y3="-3.65510128" z3="-6.01677135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44428695" y3="-2.67496416" z3="-4.55207607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0652029" y3="1.16940879" z3="-1.48239997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10409174" y3="1.55623857" z3="-2.46127539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43235619" y3="1.50797491" z3="-1.67641625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84046642" y3="2.18021414" z3="-2.80244923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15892579" y3="1.21206" z3="-0.91336794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89576497" y3="2.4302715" z3="-2.94347385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56248946" y3="2.23260681" z3="-3.6261345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89266221" y3="2.53559391" z3="-3.79197182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84102823" y3="2.50306027" z3="-4.40064291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22272532" y3="3.04959027" z3="-4.69924182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38894935" y3="3.14637757" z3="-3.31885694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27228944" y3="3.55717791" z3="-4.10504806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19188219" y3="4.15846406" z3="-2.72103936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9361062" y3="5.49081764" z3="-2.94070995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02110005" y3="3.87080217" z3="-2.07283242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56938641" y3="6.24733276" z3="-2.46873881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04222027" y3="4.94266198" z3="-4.32658299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85872683" y3="5.89259686" z3="-3.76550841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19010147" y3="5.23874633" z3="-4.94623777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67095198" y3="6.95529751" z3="-3.94006635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47745832" y3="-2.18459028" z3="-0.29475371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45181169" y3="-2.97951582" z3="-1.05940564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00531865" y3="-2.56252612" z3="0.59541644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09076991" y3="-1.36435972" z3="-0.71387552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17623296" y3="-1.41773804" z3="-1.15413982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31086837" y3="-0.37693586" z3="-1.50288603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09959978" y3="-1.545839" z3="-0.95194528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42127493" y3="-2.07273783" z3="-2.00370759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3384,.0425,-.19;7.3828,.1691,.4224;6.6431,.4413,-.3367;4.7227,1.2319,-2.2563;4.3857,.4248,-1.1819;2.7246,.8385,-3.6576;3.6259,1.7427,-3.1272;1.3698,2.582,-4.6038;1.5546,1.2407,-4.3674;.4897,2.9157,-5.1623;2.927,-.4921,-3.4428;3.0973,.0289,-1.0014;2.4041,-1.1132,-2.0055;.9321,-.9871,-1.8327;3.1091,-2.4365,-1.8551;-.1399,-3.6089,.6694;-.0152,-5.2712,-4.7412;-.2434,-5.0084,-3.7046;-.8401,-4.3046,-1.0879;.7828,-4.6024,-2.8532;-1.5606,-5.0889,-3.2474;-1.8598,-4.7315,-1.9349;.4964,-4.2654,-1.5286;1.8169,-4.5294,-3.1994;-2.3611,-5.4007,-3.9222;-2.8972,-4.7622,-1.5927;-1.0289,-3.8514,.2315;-2.1687,-3.6375,.8767;-3.0569,-4.0989,.4428;-2.1642,-3.5016,2.3436;-2.2245,-3.3152,5.1413;-3.3609,-3.702,3.046;-.9974,-3.2149,3.0662;-1.0249,-3.1223,4.4547;-3.3901,-3.6109,4.4347;-4.2755,-3.9391,2.4971;-.0376,-3.0861,2.5625;-.0961,-2.9198,4.9942;-4.3286,-3.7782,4.969;-2.2456,-3.2505,6.2327;1.4187,-3.9028,-.6255;2.1787,-3.4033,-1.0798;.5168,.2334,-4.7077;-3.0773,-1.7093,.0194;-2.8968,-.9557,1.1786;-1.8339,-.3044,1.5064;-.3534,.56,1.2063;-.4241,1.4521,-.4242;.9909,-.7029,1.395;-.3372,1.7608,2.6442;-3.8686,-.9427,2.0798;-3.6346,-.3272,3.3365;-.1971,.7545,-1.2493;.3615,2.2315,-.4257;-1.3982,1.9481,-.5836;1.0123,-1.0657,2.4362;1.9671,-.2452,1.1606;.8654,-1.5453,.6956;-.3931,1.2275,3.6096;.5946,2.3501,2.6397;-1.1799,2.4693,2.59;-2.773,-.7859,3.8476;-4.5487,-.4966,3.921;-3.4602,.7542,3.2137;4.8415,-.7193,.9905;4.415,-2.0456,.8475;3.7628,-2.695,1.8882;3.5547,-2.0055,3.0789;4.0349,-.7148,3.2788;4.6862,-.0785,2.2268;4.5193,-2.5403,-.1195;3.3655,-3.7027,1.7611;2.6931,-2.6078,4.1013;3.8535,-.2084,4.2272;5.0295,.9527,2.3457;-.8019,.4539,-4.288;-1.781,-.5144,-4.4696;-1.4309,-1.7067,-5.0926;-.1428,-1.9378,-5.5653;.8293,-.9662,-5.3626;-1.048,1.3777,-3.7583;-2.8022,-.3696,-4.1128;-2.442,-2.7562,-5.2346;.0897,-2.8787,-6.065;1.8524,-1.152,-5.6942;2.3715,-1.9193,5.05;2.3089,-3.7452,3.9254;-2.218,-3.6551,-6.0168;-3.4443,-2.675,-4.5521;7.0652,1.1694,-1.4824;6.1041,1.5562,-2.4613;8.4324,1.508,-1.6764;8.8405,2.1802,-2.8024;9.1589,1.2121,-.9134;9.8958,2.4303,-2.9435;6.5625,2.2326,-3.6261;7.8927,2.5356,-3.792;5.841,2.5031,-4.4006;8.2227,3.0496,-4.6992;3.3889,3.1464,-3.3189;2.2723,3.5572,-4.105;4.1919,4.1585,-2.721;3.9361,5.4908,-2.9407;5.0211,3.8708,-2.0728;4.5694,6.2473,-2.4687;2.0422,4.9427,-4.3266;2.8587,5.8926,-3.7655;1.1901,5.2387,-4.9462;2.671,6.9553,-3.9401;-4.4775,-2.1846,-.2948;-4.4518,-2.9795,-1.0594;-5.0053,-2.5625,.5954;-5.0908,-1.3644,-.7139;-2.1762,-1.4177,-1.1541;-2.3109,-.3769,-1.5029;-1.0996,-1.5458,-.9519;-2.4213,-2.0727,-2.0037;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650403588317</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002534162142 0.000394669993 0.024121754338 0.005333577700</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030320544 -0.001224218 0.000173046 0.000187216 0.000217226 0.000314681 0.000348919 0.000383284 0.000528136 0.000580177 0.000768592 0.000814415 0.000847117 0.000931924 0.001037443 0.001124671 0.001167859 0.001253802 0.001356146 0.001476585 0.001601834 0.001654831 0.001823796 0.002021757 0.002170771 0.002271332 0.002617046 0.002829358 0.002914952 0.003246177 0.003340449 0.003837123 0.004056585 0.004202745 0.005142137 0.005336430 0.005495620 0.005923576 0.006358724 0.006647944 0.007244021 0.007448156 0.007868474 0.008130906 0.008717358 0.009048591 0.009497011 0.009871847 0.010102635 0.010989064 0.011729865 0.012307251 0.012864849 0.013287095 0.013871279 0.014624034 0.014993679 0.015205390 0.015319582 0.015520015 0.016167559 0.016824899 0.018013266 0.018276827 0.018786917 0.019526466 0.019907917 0.020940886 0.021288354 0.021998859 0.022817860 0.024221415 0.024422714 0.025870340 0.026367851 0.026934604 0.028328692 0.028785795 0.030776111 0.031498640 0.032231726 0.033480293 0.033979001 0.035051868 0.037516214 0.038223515 0.039202160 0.039692688 0.040805990 0.043318895 0.043915610 0.043958392 0.045423387 0.048401430 0.049183991 0.049626815 0.050197336 0.050990878 0.052128205 0.052332570 0.052391421 0.052622427 0.053557097 0.054060712 0.054687679 0.055119515 0.055618897 0.056168341 0.056368463 0.056485126 0.057151965 0.058502548 0.059498715 0.060661603 0.061161052 0.061990042 0.062023161 0.062342891 0.064905547 0.065733705 0.065876327 0.066009004 0.067507474 0.071878388 0.073792112 0.074829387 0.076917922 0.080602188 0.083648423 0.085034725 0.085737174 0.086342336 0.087458946 0.089750435 0.090789724 0.093600232 0.094509409 0.095566293 0.095837957 0.097390556 0.097449813 0.098219519 0.099243793 0.099739278 0.100085874 0.101020278 0.101502797 0.102459856 0.103005655 0.103753916 0.104526570 0.106344544 0.106848005 0.107147925 0.108941664 0.109700902 0.110571548 0.112284729 0.113182523 0.114049148 0.117321967 0.118647950 0.119474919 0.121198957 0.123540038 0.125066499 0.126021509 0.130589022 0.131838029 0.134809223 0.141677143 0.142393917 0.145114100 0.146064432 0.146647242 0.149261157 0.150297533 0.151548502 0.152946747 0.158748240 0.160271836 0.172165231 0.172944735 0.175693208 0.182753326 0.183435062 0.186493778 0.187971099 0.191134411 0.193136085 0.196585683 0.197877631 0.202408002 0.204834610 0.206753410 0.209614870 0.209797535 0.212746380 0.213328002 0.216471898 0.218170162 0.224242789 0.224997548 0.229780712 0.233729449 0.234344508 0.234959951 0.243681731 0.254437313 0.256547313 0.260698095 0.265609909 0.278377908 0.282246450 0.286013789 0.288553460 0.292515958 0.299309704 0.304229941 0.305042286 0.306145501 0.313071387 0.314658757 0.321589462 0.322162664 0.329275721 0.345909567 0.348044641 0.350687004 0.353785038 0.354402959 0.360812018 0.361646363 0.377069888 0.377830896 0.388887408 0.408430089 0.421834091 0.426006082 0.450488516 0.466279399 0.468636182 0.475620688 0.480417130 0.480947587 0.487289407 0.502502480 0.508533522 0.533411571 0.564626445 0.567234286 0.585164044 0.592155608 0.598818669 0.603243423 0.637044611 0.641419341 0.644335167 0.668869528 0.672428008 0.683733630 0.685478015 0.691238766 0.697995114 0.703817533 0.713489244 0.723544956 0.738686854 0.749934754 0.759294964 0.771850786 0.776663550 0.805667931 0.809448681 0.812651569 0.815236771 0.820068307 0.821649456 0.829401478 0.830838641 0.831591978 0.841075516 0.844905983 0.845798430 0.851567661 0.857530439 0.863564596 0.864624642 0.870634741 0.874221605 0.883338884 0.887421112 0.891618366 0.895889859 0.917925460 0.922143962 0.930511767 0.932280074 0.963811582 0.975208391 0.983856352 0.999147384 1.011041509 1.024260733 1.039919563 1.047583710 1.054098414 1.060395353 1.085343561 1.086093456 1.096620067 1.104757962 1.111211790 1.112237280 1.122727205 1.123601163 1.134997716 1.138988955 1.170347027 1.170628875 1.179026047 1.185506646 1.194063461 1.213396554 1.220048419 1.264803105 1.295647945 1.313494266 1.324041884 1.325281058 1.327592489 1.328952488 1.333031061 1.341238586 1.342159901 1.355451041 1.374678725 1.380366417 1.380928111 1.387698090 1.418429807 1.419432584 1.551000953 1.659961268 1.772149477</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">73</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33853359" y3="0.03887998" z3="-0.18981989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38291253" y3="0.1684645" z3="0.4225768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6425213" y3="0.44057447" z3="-0.33593882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72017917" y3="1.23031648" z3="-2.25400846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38493614" y3="0.42057063" z3="-1.18122218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72261179" y3="0.8355144" z3="-3.65674316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6221952" y3="1.74052472" z3="-3.12383509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36549158" y3="2.5784125" z3="-4.59986465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55230505" y3="1.23669323" z3="-4.36713987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48466181" y3="2.91236949" z3="-5.15696487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92681589" y3="-0.49481884" z3="-3.44384917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09721094" y3="0.0219377" z3="-1.00129861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40505914" y3="-1.11890801" z3="-2.00754975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93293543" y3="-0.99430104" z3="-1.83433371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11102884" y3="-2.44197976" z3="-1.85946068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13961589" y3="-3.60663926" z3="0.66616061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01555931" y3="-5.27963141" z3="-4.73977409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24374206" y3="-5.01464396" z3="-3.70389326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84018157" y3="-4.30613341" z3="-1.08899363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78198675" y3="-4.60762706" z3="-2.8530748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56031284" y3="-5.09391321" z3="-3.24694205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85936089" y3="-4.733989" z3="-1.9353608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49569288" y3="-4.26822823" z3="-1.52932592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81547183" y3="-4.53533603" z3="-3.19887257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3601104" y3="-5.40692362" z3="-3.92122675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89622924" y3="-4.76401422" z3="-1.59322385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02862741" y3="-3.85054802" z3="0.22957037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16803125" y3="-3.63435199" z3="0.87495851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05697841" y3="-4.09501121" z3="0.44165855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16310541" y3="-3.49654833" z3="2.34167591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22126166" y3="-3.30809225" z3="5.13947316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36354755" y3="-3.68699367" z3="3.04396832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99177783" y3="-3.21819628" z3="3.06447165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01819242" y3="-3.12467634" z3="4.45298762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39189273" y3="-3.5946008" z3="4.43270486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28223102" y3="-3.9164939" z3="2.49477791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02879668" y3="-3.09754269" z3="2.56109717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08580028" y3="-2.92921235" z3="4.99250598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33346174" y3="-3.75410475" z3="4.96704719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2414434" y3="-3.2430513" z3="6.23098004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41760821" y3="-3.90460515" z3="-0.62685022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17928015" y3="-3.40797417" z3="-1.0822754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51563776" y3="0.2291116" z3="-4.70937465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07492791" y3="-1.70589714" z3="0.01617955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89300444" y3="-0.95138897" z3="1.17420328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82812181" y3="-0.30266124" z3="1.50105243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34998175" y3="0.5628028" z3="1.20227887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41633018" y3="1.45100461" z3="-0.43090509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99439424" y3="-0.69830179" z3="1.3966837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3376047" y3="1.76754751" z3="2.63655598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86481734" y3="-0.93469265" z3="2.07560939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62862957" y3="-0.31818871" z3="3.33162681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18814146" y3="0.75332493" z3="-1.25359509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36871308" y3="2.22907918" z3="-0.43220833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38860886" y3="1.94803167" z3="-0.59411156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01310109" y3="-1.06057537" z3="2.43804828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97123239" y3="-0.24146926" z3="1.1642916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8701231" y3="-1.54096143" z3="0.69733412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39733366" y3="1.23739927" z3="3.60373515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60230507" y3="2.35170429" z3="2.63040758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17731303" y3="2.48452697" z3="2.57824214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76707697" y3="-0.77751711" z3="3.84240303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54235553" y3="-0.48580924" z3="3.91729531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45278533" y3="0.76294334" z3="3.20777516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84273444" y3="-0.72458181" z3="0.99017476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41337921" y3="-2.05001708" z3="0.84508578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76124519" y3="-2.69996527" z3="1.88551939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55661161" y3="-2.01209535" z3="3.07819739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04021876" y3="-0.72271377" z3="3.28023858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69117146" y3="-0.0857908" z3="2.22841011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51519853" y3="-2.54325791" z3="-0.12333255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36174098" y3="-3.70683713" z3="1.75697835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6954626" y3="-2.61442533" z3="4.10090918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86179641" y3="-0.21762904" z3="4.23032507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03684676" y3="0.94471281" z3="2.34899906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80378846" y3="0.44933394" z3="-4.29129109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78235057" y3="-0.51807524" z3="-4.47032002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43115578" y3="-1.71074372" z3="-5.09148751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14256774" y3="-1.94142062" z3="-5.56396456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82892662" y3="-0.97071414" z3="-5.36232117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05184391" y3="1.37344583" z3="-3.76275377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80200622" y3="-0.37071831" z3="-4.11548652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44165336" y3="-2.76070941" z3="-5.23499712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09001544" y3="-2.88249608" z3="-6.06217015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8518549" y3="-1.15734847" z3="-5.69219452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37776823" y3="-1.92740497" z3="5.05222504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30798902" y3="-3.75054064" z3="3.92289118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21784916" y3="-3.65922961" z3="-6.01729199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44297593" y3="-2.67842925" z3="-4.55240629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06306124" y3="1.17112317" z3="-1.48053087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10101329" y3="1.55789378" z3="-2.45855309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42947943" y3="1.51208111" z3="-1.6742666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83606042" y3="2.18669416" z3="-2.79919327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15672762" y3="1.21587025" z3="-0.91198838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89075676" y3="2.43824534" z3="-2.94010905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55793683" y3="2.23723123" z3="-3.62216335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88744679" y3="2.54254349" z3="-3.78774888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83589054" y3="2.50798096" z3="-4.39600613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21633033" y3="3.05866289" z3="-4.69411195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38308435" y3="3.14410848" z3="-3.31244407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26581503" y3="3.55448035" z3="-4.09790102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18403337" y3="4.15659466" z3="-2.71190385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92518655" y3="5.48948141" z3="-2.92763762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01389137" y3="3.86908969" z3="-2.06443706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55724337" y3="6.24608541" z3="-2.45403876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03242813" y3="4.94072919" z3="-4.31503218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84677737" y3="5.89142207" z3="-3.75102066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17957524" y3="5.2368114" z3="-4.93369815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65623124" y3="6.95479823" z3="-3.92219277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47572679" y3="-2.18005701" z3="-0.29663468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45136417" y3="-2.97655411" z3="-1.05984128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00345474" y3="-2.55580246" z3="0.59482676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08845285" y3="-1.36006235" z3="-0.71691999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17355771" y3="-1.41688609" z3="-1.15744234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30795412" y3="-0.37709085" z3="-1.50840317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0969914" y3="-1.54492284" z3="-0.95499299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41922562" y3="-2.07341479" z3="-2.00589056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3385,.0389,-.1898;7.3829,.1685,.4226;6.6425,.4406,-.3359;4.7202,1.2303,-2.254;4.3849,.4206,-1.1812;2.7226,.8355,-3.6567;3.6222,1.7405,-3.1238;1.3655,2.5784,-4.5999;1.5523,1.2367,-4.3671;.4847,2.9124,-5.157;2.9268,-.4948,-3.4438;3.0972,.0219,-1.0013;2.4051,-1.1189,-2.0075;.9329,-.9943,-1.8343;3.111,-2.442,-1.8595;-.1396,-3.6066,.6662;-.0156,-5.2796,-4.7398;-.2437,-5.0146,-3.7039;-.8402,-4.3061,-1.089;.782,-4.6076,-2.8531;-1.5603,-5.0939,-3.2469;-1.8594,-4.734,-1.9354;.4957,-4.2682,-1.5293;1.8155,-4.5353,-3.1989;-2.3601,-5.4069,-3.9212;-2.8962,-4.764,-1.5932;-1.0286,-3.8505,.2296;-2.168,-3.6344,.875;-3.057,-4.095,.4417;-2.1631,-3.4965,2.3417;-2.2213,-3.3081,5.1395;-3.3635,-3.687,3.044;-.9918,-3.2182,3.0645;-1.0182,-3.1247,4.453;-3.3919,-3.5946,4.4327;-4.2822,-3.9165,2.4948;-.0288,-3.0975,2.5611;-.0858,-2.9292,4.9925;-4.3335,-3.7541,4.967;-2.2414,-3.2431,6.231;1.4176,-3.9046,-.6269;2.1793,-3.408,-1.0823;.5156,.2291,-4.7094;-3.0749,-1.7059,.0162;-2.893,-.9514,1.1742;-1.8281,-.3027,1.5011;-.35,.5628,1.2023;-.4163,1.451,-.4309;.9944,-.6983,1.3967;-.3376,1.7675,2.6366;-3.8648,-.9347,2.0756;-3.6286,-.3182,3.3316;-.1881,.7533,-1.2536;.3687,2.2291,-.4322;-1.3886,1.948,-.5941;1.0131,-1.0606,2.438;1.9712,-.2415,1.1643;.8701,-1.541,.6973;-.3973,1.2374,3.6037;.6023,2.3517,2.6304;-1.1773,2.4845,2.5782;-2.7671,-.7775,3.8424;-4.5424,-.4858,3.9173;-3.4528,.7629,3.2078;4.8427,-.7246,.9902;4.4134,-2.05,.8451;3.7612,-2.7,1.8855;3.5566,-2.0121,3.0782;4.0402,-.7227,3.2802;4.6912,-.0858,2.2284;4.5152,-2.5433,-.1233;3.3617,-3.7068,1.757;2.6955,-2.6144,4.1009;3.8618,-.2176,4.2303;5.0368,.9447,2.349;-.8038,.4493,-4.2913;-1.7824,-.5181,-4.4703;-1.4312,-1.7107,-5.0915;-.1426,-1.9414,-5.564;.8289,-.9707,-5.3623;-1.0518,1.3734,-3.7628;-2.802,-.3707,-4.1155;-2.4417,-2.7607,-5.235;.09,-2.8825,-6.0622;1.8519,-1.1573,-5.6922;2.3778,-1.9274,5.0522;2.308,-3.7505,3.9229;-2.2178,-3.6592,-6.0173;-3.443,-2.6784,-4.5524;7.0631,1.1711,-1.4805;6.101,1.5579,-2.4586;8.4295,1.5121,-1.6743;8.8361,2.1867,-2.7992;9.1567,1.2159,-.912;9.8908,2.4382,-2.9401;6.5579,2.2372,-3.6222;7.8874,2.5425,-3.7877;5.8359,2.508,-4.396;8.2163,3.0587,-4.6941;3.3831,3.1441,-3.3124;2.2658,3.5545,-4.0979;4.184,4.1566,-2.7119;3.9252,5.4895,-2.9276;5.0139,3.8691,-2.0644;4.5572,6.2461,-2.454;2.0324,4.9407,-4.315;2.8468,5.8914,-3.751;1.1796,5.2368,-4.9337;2.6562,6.9548,-3.9222;-4.4757,-2.1801,-.2966;-4.4514,-2.9766,-1.0598;-5.0035,-2.5558,.5948;-5.0885,-1.3601,-.7169;-2.1736,-1.4169,-1.1574;-2.308,-.3771,-1.5084;-1.097,-1.5449,-.955;-2.4192,-2.0734,-2.0059;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650398969394</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002908655521 0.000382507626 0.018669037226 0.005337792529</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030322877 -0.001109193 0.000174075 0.000187902 0.000221432 0.000315455 0.000348809 0.000393146 0.000528089 0.000580013 0.000769149 0.000837212 0.000856866 0.000932413 0.001060512 0.001124602 0.001183220 0.001268031 0.001358570 0.001589555 0.001636380 0.001654830 0.001824839 0.002083150 0.002189109 0.002368500 0.002633643 0.002868706 0.002935126 0.003251384 0.003350322 0.003840343 0.004059036 0.004295561 0.005161929 0.005346888 0.005499905 0.005932817 0.006417079 0.006682140 0.007260648 0.007489663 0.007912635 0.008146800 0.008718146 0.009050308 0.009504419 0.009871733 0.010104447 0.011001216 0.011729476 0.012306858 0.012865153 0.013290151 0.013871567 0.014625987 0.014993435 0.015212721 0.015320256 0.015530123 0.016167741 0.016828463 0.018018091 0.018291227 0.018786876 0.019545331 0.019910711 0.020945670 0.021293286 0.021999212 0.022818767 0.024232066 0.024439709 0.025872838 0.026369038 0.026937141 0.028329096 0.028786465 0.030776002 0.031498557 0.032245044 0.033486166 0.034003254 0.035051864 0.037527409 0.038228172 0.039203494 0.039716661 0.040806035 0.043337400 0.043930149 0.043958148 0.045427544 0.048404874 0.049185640 0.049627043 0.050197567 0.050995350 0.052129972 0.052332644 0.052391438 0.052625680 0.053556709 0.054075462 0.054688487 0.055119514 0.055651212 0.056190125 0.056370165 0.056485634 0.057151634 0.058514389 0.059501046 0.060661733 0.061162197 0.061990529 0.062027695 0.062344239 0.064909397 0.065738872 0.065880444 0.066026921 0.067512670 0.071879096 0.073802234 0.074845969 0.076922517 0.080623670 0.083675321 0.085042113 0.085737653 0.086342735 0.087466895 0.089750587 0.090792348 0.093599914 0.094509851 0.095568770 0.095848448 0.097392756 0.097468021 0.098224154 0.099252509 0.099816513 0.100095031 0.101024632 0.101504226 0.102466403 0.103008189 0.103754360 0.104526265 0.106345437 0.106847864 0.107194075 0.108948045 0.109704163 0.110573348 0.112290275 0.113182731 0.114052393 0.117322220 0.118648889 0.119481229 0.121198816 0.123663060 0.125078789 0.126022089 0.130596113 0.132444111 0.134809286 0.141690196 0.142394451 0.145114636 0.146068020 0.146650986 0.149417583 0.150335601 0.151602872 0.152957005 0.158767127 0.160272521 0.172166252 0.172964338 0.175696350 0.182757442 0.183443263 0.187098645 0.188012426 0.191149344 0.193175249 0.196599751 0.197916126 0.202409703 0.204930788 0.206753408 0.209616131 0.209803841 0.212747310 0.213403217 0.216484091 0.218195299 0.224283735 0.225006808 0.229781779 0.233731674 0.234344532 0.234970403 0.243681984 0.254438075 0.256567425 0.260704430 0.265621301 0.278380708 0.282256184 0.286026859 0.288553361 0.292533815 0.299312815 0.304236198 0.305042328 0.306154409 0.313078286 0.314659815 0.321591751 0.322164919 0.329279914 0.345952949 0.348056027 0.350710118 0.354001281 0.354419136 0.360835592 0.361647608 0.377090156 0.377840222 0.388905190 0.408453035 0.421834058 0.426025228 0.450488786 0.466281149 0.468639549 0.475621345 0.480419172 0.480948131 0.487297103 0.502503855 0.508533952 0.533412266 0.564626623 0.567237845 0.585194371 0.592158420 0.598838529 0.603251565 0.637072457 0.641419650 0.644338213 0.669150249 0.672450330 0.683745189 0.685713874 0.691238921 0.698010425 0.703817533 0.713536836 0.723760733 0.738687218 0.749935524 0.759315450 0.771850789 0.776664912 0.805721002 0.809493596 0.812653783 0.815331311 0.820068396 0.821689275 0.829417001 0.830839206 0.831600386 0.841078163 0.844905993 0.845850091 0.851690440 0.857540040 0.863581365 0.864624905 0.870649551 0.874245391 0.883341488 0.887422598 0.891626870 0.895889783 0.917934881 0.922144503 0.930524714 0.932282229 0.963820458 0.975209906 0.983861300 0.999151857 1.011043209 1.024283487 1.039928821 1.047587364 1.054100682 1.060411133 1.085349203 1.086108038 1.096654348 1.104760468 1.111226965 1.112243454 1.122728265 1.123601902 1.134999336 1.138992285 1.170348058 1.170630191 1.179026825 1.185508831 1.194063462 1.213396908 1.220050209 1.264806480 1.295658483 1.313515073 1.324051087 1.325311157 1.327698854 1.328959425 1.333256796 1.341272315 1.342873460 1.355451441 1.374679146 1.380366985 1.380930711 1.387699257 1.418431379 1.419886080 1.551004879 1.659967546 1.772150311</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">74</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33855171" y3="0.03393294" z3="-0.19006251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38274678" y3="0.16665151" z3="0.42239727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64178009" y3="0.4380194" z3="-0.33587681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7178773" y3="1.22716297" z3="-2.25250468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38421905" y3="0.41516001" z3="-1.18103014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72041199" y3="0.83276666" z3="-3.65515333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61894994" y3="1.73758598" z3="-3.12095235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36061276" y3="2.57585422" z3="-4.59416549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54926084" y3="1.23415809" z3="-4.363821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47941999" y3="2.90965641" z3="-5.1508111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92674854" y3="-0.49779038" z3="-3.44496169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09721077" y3="0.01445852" z3="-1.00158324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40559155" y3="-1.12498032" z3="-2.00977071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93348331" y3="-1.00140405" z3="-1.83572798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11192936" y3="-2.44807054" z3="-1.8642331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13721989" y3="-3.60525393" z3="0.66421668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01964652" y3="-5.28718382" z3="-4.74024255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2467099" y3="-5.02027557" z3="-3.70455682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84034857" y3="-4.30583458" z3="-1.0901417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78080791" y3="-4.61470184" z3="-2.8545975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56384097" y3="-5.09522152" z3="-3.24683112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86149564" y3="-4.73233399" z3="-1.93562977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49609149" y3="-4.27288708" z3="-1.53105046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81483493" y3="-4.54589129" z3="-3.20094041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36519529" y3="-5.4070314" z3="-3.92044077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89898015" y3="-4.75851926" z3="-1.59322735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02717677" y3="-3.84764077" z3="0.22788274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16598323" y3="-3.6303808" z3="0.87378078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05527581" y3="-4.09104289" z3="0.44133768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16046629" y3="-3.49130276" z3="2.34033422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2204869" y3="-3.29794677" z3="5.13744542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35747711" y3="-3.68557056" z3="3.04331204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99309178" y3="-3.20746909" z3="3.06212568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02034288" y3="-3.11166283" z3="4.45044095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38647231" y3="-3.59111075" z3="4.43177735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2722377" y3="-3.9207484" z3="2.49508595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03291394" y3="-3.08411595" z3="2.55816672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09117086" y3="-2.91208425" z3="4.98961659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32565803" y3="-3.75301049" z3="4.96637299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24128258" y3="-3.23092599" z3="6.22873392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42047571" y3="-3.91134356" z3="-0.62931903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18047547" y3="-3.41450081" z3="-1.0853995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51357622" y3="0.22653903" z3="-4.70693189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07228658" y3="-1.70174627" z3="0.01376377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88968777" y3="-0.94593707" z3="1.17071284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82594248" y3="-0.29564543" z3="1.4958754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34452235" y3="0.5672348" z3="1.19761143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40691456" y3="1.45116127" z3="-0.43781165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99830059" y3="-0.69582561" z3="1.3977896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33366641" y3="1.7760163" z3="2.62888539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8604211" y3="-0.92899487" z3="2.0729581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62415475" y3="-0.31012394" z3="3.32727374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18495371" y3="0.74729427" z3="-1.25905115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38521675" y3="2.2243788" z3="-0.44358842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37697719" y3="1.95389479" z3="-0.6005732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01369688" y3="-1.05685159" z3="2.43965227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97628164" y3="-0.24006943" z3="1.16767648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87523347" y3="-1.53908861" z3="0.69895795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39693246" y3="1.24862579" z3="3.59732474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.6046095" y3="2.36006011" z3="2.62439623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17284904" y3="2.49167003" z3="2.56637565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76310066" y3="-0.76858113" z3="3.83903506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53779591" y3="-0.47610916" z3="3.91324458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44757782" y3="0.77055604" z3="3.20093024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84421198" y3="-0.73065524" z3="0.98975564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41050197" y3="-2.05457828" z3="0.84295524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75878925" y3="-2.70462898" z3="1.88356215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55893034" y3="-2.01841592" z3="3.07813046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04732821" y3="-0.73102597" z3="3.28187288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6978674" y3="-0.09395833" z3="2.22985423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50852155" y3="-2.54629038" z3="-0.12680685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35566152" y3="-3.71001842" z3="1.7535364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69784727" y3="-2.62004605" z3="4.10130662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87284283" y3="-0.22726609" z3="4.23345002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04729494" y3="0.93521205" z3="2.3520548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8062629" y3="0.44633206" z3="-4.2908647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78378161" y3="-0.52360138" z3="-4.47450342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43056039" y3="-1.71596623" z3="-5.09518349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14138733" y3="-1.94618484" z3="-5.56474789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82887062" y3="-0.97302828" z3="-5.35987846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05575248" y3="1.37015973" z3="-3.76255222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8054513" y3="-0.3793458" z3="-4.11974225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43996734" y3="-2.76691338" z3="-5.23855887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09290034" y3="-2.8872147" z3="-6.06253468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85296213" y3="-1.15770879" z3="-5.68946578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38320195" y3="-1.93342608" z3="5.05375709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30709829" y3="-3.75485162" z3="3.9223446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21402783" y3="-3.66528889" z3="-6.02068093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44261539" y3="-2.68697101" z3="-4.55645282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06089289" y3="1.17083052" z3="-1.47947349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09797172" y3="1.55750242" z3="-2.45667116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42673151" y3="1.51523519" z3="-1.67263319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83187692" y3="2.19357587" z3="-2.79604693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15472358" y3="1.21903829" z3="-0.91103954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88620013" y3="2.44830784" z3="-2.93637287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55335596" y3="2.24040921" z3="-3.61884951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88235465" y3="2.54949052" z3="-3.78373726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83059528" y3="2.51135587" z3="-4.39197208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21012984" y3="3.06871587" z3="-4.68887309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37726972" y3="3.14132977" z3="-3.30569359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25933905" y3="3.55185425" z3="-4.0901092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17605546" y3="4.15359695" z3="-2.70187779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91458479" y3="5.48656863" z3="-2.91347247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00626667" y3="3.86575664" z3="-2.0550526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54458769" y3="6.24327975" z3="-2.4368161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02337612" y3="4.93816934" z3="-4.30319307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83555311" y3="5.88875386" z3="-3.73589672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16995136" y3="5.23453444" z3="-4.92091536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64279167" y3="6.95226151" z3="-3.90352373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4736018" y3="-2.17488468" z3="-0.29818682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45017066" y3="-2.97209032" z3="-1.0605175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00172935" y3="-2.54905104" z3="0.59338372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08554925" y3="-1.35461389" z3="-0.71930065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17151785" y3="-1.41474738" z3="-1.16076544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30533195" y3="-0.3751508" z3="-1.51298587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09497522" y3="-1.54315118" z3="-0.95845379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4172314" y3="-2.07215868" z3="-2.00810397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3386,.0339,-.1901;7.3827,.1667,.4224;6.6418,.438,-.3359;4.7179,1.2272,-2.2525;4.3842,.4152,-1.181;2.7204,.8328,-3.6552;3.6189,1.7376,-3.121;1.3606,2.5759,-4.5942;1.5493,1.2342,-4.3638;.4794,2.9097,-5.1508;2.9267,-.4978,-3.445;3.0972,.0145,-1.0016;2.4056,-1.125,-2.0098;.9335,-1.0014,-1.8357;3.1119,-2.4481,-1.8642;-.1372,-3.6053,.6642;-.0196,-5.2872,-4.7402;-.2467,-5.0203,-3.7046;-.8403,-4.3058,-1.0901;.7808,-4.6147,-2.8546;-1.5638,-5.0952,-3.2468;-1.8615,-4.7323,-1.9356;.4961,-4.2729,-1.5311;1.8148,-4.5459,-3.2009;-2.3652,-5.407,-3.9204;-2.899,-4.7585,-1.5932;-1.0272,-3.8476,.2279;-2.166,-3.6304,.8738;-3.0553,-4.091,.4413;-2.1605,-3.4913,2.3403;-2.2205,-3.2979,5.1374;-3.3575,-3.6856,3.0433;-.9931,-3.2075,3.0621;-1.0203,-3.1117,4.4504;-3.3865,-3.5911,4.4318;-4.2722,-3.9207,2.4951;-.0329,-3.0841,2.5582;-.0912,-2.9121,4.9896;-4.3257,-3.753,4.9664;-2.2413,-3.2309,6.2287;1.4205,-3.9113,-.6293;2.1805,-3.4145,-1.0854;.5136,.2265,-4.7069;-3.0723,-1.7017,.0138;-2.8897,-.9459,1.1707;-1.8259,-.2956,1.4959;-.3445,.5672,1.1976;-.4069,1.4512,-.4378;.9983,-.6958,1.3978;-.3337,1.776,2.6289;-3.8604,-.929,2.073;-3.6242,-.3101,3.3273;-.185,.7473,-1.2591;.3852,2.2244,-.4436;-1.377,1.9539,-.6006;1.0137,-1.0569,2.4397;1.9763,-.2401,1.1677;.8752,-1.5391,.699;-.3969,1.2486,3.5973;.6046,2.3601,2.6244;-1.1728,2.4917,2.5664;-2.7631,-.7686,3.839;-4.5378,-.4761,3.9132;-3.4476,.7706,3.2009;4.8442,-.7307,.9898;4.4105,-2.0546,.843;3.7588,-2.7046,1.8836;3.5589,-2.0184,3.0781;4.0473,-.731,3.2819;4.6979,-.094,2.2299;4.5085,-2.5463,-.1268;3.3557,-3.71,1.7535;2.6978,-2.62,4.1013;3.8728,-.2273,4.2335;5.0473,.9352,2.3521;-.8063,.4463,-4.2909;-1.7838,-.5236,-4.4745;-1.4306,-1.716,-5.0952;-.1414,-1.9462,-5.5647;.8289,-.973,-5.3599;-1.0558,1.3702,-3.7626;-2.8055,-.3793,-4.1197;-2.44,-2.7669,-5.2386;.0929,-2.8872,-6.0625;1.853,-1.1577,-5.6895;2.3832,-1.9334,5.0538;2.3071,-3.7549,3.9223;-2.214,-3.6653,-6.0207;-3.4426,-2.687,-4.5565;7.0609,1.1708,-1.4795;6.098,1.5575,-2.4567;8.4267,1.5152,-1.6726;8.8319,2.1936,-2.796;9.1547,1.219,-.911;9.8862,2.4483,-2.9364;6.5534,2.2404,-3.6188;7.8824,2.5495,-3.7837;5.8306,2.5114,-4.392;8.2101,3.0687,-4.6889;3.3773,3.1413,-3.3057;2.2593,3.5519,-4.0901;4.1761,4.1536,-2.7019;3.9146,5.4866,-2.9135;5.0063,3.8658,-2.0551;4.5446,6.2433,-2.4368;2.0234,4.9382,-4.3032;2.8356,5.8888,-3.7359;1.17,5.2345,-4.9209;2.6428,6.9523,-3.9035;-4.4736,-2.1749,-.2982;-4.4502,-2.9721,-1.0605;-5.0017,-2.5491,.5934;-5.0855,-1.3546,-.7193;-2.1715,-1.4147,-1.1608;-2.3053,-.3752,-1.513;-1.095,-1.5432,-.9585;-2.4172,-2.0722,-2.0081;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650396785893</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003078014737 0.000340345608 0.018559948774 0.005338311920</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030323905 -0.000883505 0.000174733 0.000191322 0.000225156 0.000321807 0.000348846 0.000390724 0.000528857 0.000586483 0.000769766 0.000842466 0.000882701 0.000946223 0.001062492 0.001127149 0.001213321 0.001286177 0.001366286 0.001608988 0.001654325 0.001677587 0.001825242 0.002103540 0.002189817 0.002436730 0.002689879 0.002875998 0.002937977 0.003262476 0.003371090 0.003849951 0.004059613 0.004348584 0.005159434 0.005349265 0.005506353 0.005942661 0.006455586 0.006705754 0.007292049 0.007509243 0.007963357 0.008207014 0.008718594 0.009050829 0.009510371 0.009874024 0.010109189 0.011006931 0.011729932 0.012310135 0.012865080 0.013293997 0.013871698 0.014630309 0.014995495 0.015211926 0.015322411 0.015535050 0.016169072 0.016827657 0.018018371 0.018300701 0.018788492 0.019554285 0.019910416 0.020946149 0.021298976 0.021999034 0.022819192 0.024242170 0.024465549 0.025875034 0.026369779 0.026936795 0.028329016 0.028789584 0.030777586 0.031498520 0.032248455 0.033488163 0.034001502 0.035051822 0.037526668 0.038227630 0.039203451 0.039715569 0.040806122 0.043340948 0.043927272 0.043959867 0.045429388 0.048406601 0.049185544 0.049627612 0.050201019 0.051000218 0.052130012 0.052332624 0.052391823 0.052632609 0.053559053 0.054085838 0.054688488 0.055119576 0.055695475 0.056210428 0.056372635 0.056487954 0.057156076 0.058520958 0.059504448 0.060662793 0.061163178 0.061991239 0.062028337 0.062345041 0.064912367 0.065739407 0.065886732 0.066028894 0.067514427 0.071879752 0.073815333 0.074849401 0.076931763 0.080634820 0.083704058 0.085064256 0.085738217 0.086342765 0.087466714 0.089752071 0.090799623 0.093607238 0.094510598 0.095569920 0.095853516 0.097393838 0.097496833 0.098230424 0.099261332 0.099862149 0.100121485 0.101040342 0.101506329 0.102469434 0.103016438 0.103768281 0.104527390 0.106346704 0.106847830 0.107207769 0.108949924 0.109706931 0.110573117 0.112294033 0.113182727 0.114055967 0.117323207 0.118651749 0.119482387 0.121200527 0.123736426 0.125089266 0.126023116 0.130609069 0.133198700 0.134810492 0.141698789 0.142394679 0.145114890 0.146067973 0.146678407 0.149460422 0.150334256 0.151722037 0.152954093 0.158770542 0.160272531 0.172166237 0.172976838 0.175696400 0.182757316 0.183442788 0.187773332 0.188122797 0.191152660 0.193237220 0.196604729 0.197943084 0.202414658 0.205043917 0.206753410 0.209620981 0.209807646 0.212750040 0.213410917 0.216508187 0.218195786 0.224317124 0.225010622 0.229781744 0.233738120 0.234344625 0.234984770 0.243682533 0.254439999 0.256581268 0.260704820 0.265632839 0.278384962 0.282261143 0.286050793 0.288559124 0.292557952 0.299331066 0.304247602 0.305044655 0.306155648 0.313078021 0.314660093 0.321621010 0.322170725 0.329283738 0.345951847 0.348068896 0.350728612 0.354010204 0.354418645 0.360882004 0.361648364 0.377134594 0.377849309 0.388906125 0.408474411 0.421834903 0.426032258 0.450491656 0.466286661 0.468640360 0.475621352 0.480426624 0.480948236 0.487314589 0.502505984 0.508535345 0.533412961 0.564627595 0.567242377 0.585233895 0.592164973 0.598865069 0.603254256 0.637127534 0.641431748 0.644352205 0.669155693 0.672481264 0.683750782 0.685812228 0.691239946 0.698022749 0.703817673 0.713606928 0.724028372 0.738687235 0.749936750 0.759343708 0.771850795 0.776664898 0.805737849 0.809500508 0.812666061 0.815331510 0.820068848 0.821697311 0.829419892 0.830839445 0.831606623 0.841085186 0.844906140 0.845855736 0.851742475 0.857554606 0.863594420 0.864625670 0.870677468 0.874256279 0.883343081 0.887435481 0.891635641 0.895892581 0.917948892 0.922146347 0.930536758 0.932284260 0.963837554 0.975215538 0.983862132 0.999151897 1.011044536 1.024314625 1.039943026 1.047588377 1.054104773 1.060414660 1.085363408 1.086130514 1.096660155 1.104766735 1.111232064 1.112244093 1.122729409 1.123602119 1.135004625 1.138999465 1.170350495 1.170630216 1.179035161 1.185511769 1.194064019 1.213400517 1.220052082 1.264809861 1.295658389 1.313530883 1.324067739 1.325375717 1.327752082 1.328966102 1.333554268 1.341272611 1.343786848 1.355478761 1.374681406 1.380367166 1.380932039 1.387721820 1.418432950 1.420023880 1.551012170 1.659970406 1.772169796</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">75</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33962457" y3="0.02801329" z3="-0.19027674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38376308" y3="0.16267252" z3="0.42109626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64206421" y3="0.43453989" z3="-0.33616589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71587139" y3="1.22528568" z3="-2.24956337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38426697" y3="0.41011903" z3="-1.17977855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71814141" y3="0.83027027" z3="-3.6516391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61511397" y3="1.73570804" z3="-3.11564589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35449653" y3="2.57358464" z3="-4.58538386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54602156" y3="1.23131634" z3="-4.35895191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47275803" y3="2.9069731" z3="-5.14146315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92721478" y3="-0.50058717" z3="-3.44468378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0979662" y3="0.00722421" z3="-1.00047732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40763528" y3="-1.13142718" z3="-2.01038974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93531821" y3="-1.00982764" z3="-1.83597796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11568642" y3="-2.45374622" z3="-1.86681372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13746489" y3="-3.60016625" z3="0.66033506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02184173" y3="-5.29557068" z3="-4.7395961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24837571" y3="-5.02612005" z3="-3.70442425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84093165" y3="-4.30505467" z3="-1.09160734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7797145" y3="-4.62093795" z3="-2.85526601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56553439" y3="-5.09749936" z3="-3.24658459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86257276" y3="-4.73116862" z3="-1.93620917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49539629" y3="-4.27558523" z3="-1.53251723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81387021" y3="-4.55527451" z3="-3.20184959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36754583" y3="-5.40877117" z3="-3.91948539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89995188" y3="-4.75458512" z3="-1.59386311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02729125" y3="-3.84395766" z3="0.22535131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16580262" y3="-3.62566412" z3="0.87150552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05514294" y3="-4.08704873" z3="0.44027712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15949385" y3="-3.48504201" z3="2.33801753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21546663" y3="-3.29087317" z3="5.13559792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35902005" y3="-3.67263563" z3="3.04161786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98774407" y3="-3.2072369" z3="3.05954033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01323352" y3="-3.11072298" z3="4.44789854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38647084" y3="-3.57715784" z3="4.43016864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27795898" y3="-3.90218845" z3="2.49358371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02562369" y3="-3.08905443" z3="2.55514112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08080011" y3="-2.91593284" z3="4.98678668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32718841" y3="-3.73464382" z3="4.96546299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23499843" y3="-3.22320084" z3="6.22694065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41989304" y3="-3.91412824" z3="-0.63153462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18244818" y3="-3.42063083" z3="-1.08826982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51226528" y3="0.22190483" z3="-4.70626334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07208723" y3="-1.69851639" z3="0.0101681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88621356" y3="-0.9413234" z3="1.16620361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81817926" y3="-0.29511638" z3="1.48900761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33950477" y3="0.56988383" z3="1.19262287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39841754" y3="1.44992751" z3="-0.4449052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00303771" y3="-0.69146051" z3="1.39872706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33266753" y3="1.78217675" z3="2.62089351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85655887" y3="-0.91947703" z3="2.06933589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61630305" y3="-0.3006126" z3="3.3236895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17539721" y3="0.7465961" z3="-1.26405198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39319553" y3="2.221518" z3="-0.44948084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36670872" y3="1.95452743" z3="-0.61113393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01523668" y3="-1.05178541" z3="2.44092237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98135568" y3="-0.2358985" z3="1.17091033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88187747" y3="-1.53524212" z3="0.70023845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39637413" y3="1.25762193" z3="3.59054715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60429305" y3="2.36758835" z3="2.61665344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17240999" y3="2.49608645" z3="2.55514064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75504692" y3="-0.76174539" z3="3.83401428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52973231" y3="-0.46389502" z3="3.91126748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4374149" y3="0.77976858" z3="3.19704773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84638327" y3="-0.73731352" z3="0.98933777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41371153" y3="-2.06095235" z3="0.84467028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7621281" y3="-2.71016252" z3="1.88587043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56113834" y3="-2.02333512" z3="3.07857979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04854314" y3="-0.73621686" z3="3.28005253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69889359" y3="-0.10005518" z3="2.22754103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51286852" y3="-2.55346052" z3="-0.12348661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36002902" y3="-3.71544136" z3="1.75795351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.7006157" y3="-2.62431549" z3="4.10262632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87312838" y3="-0.23192182" z3="4.23007338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04712474" y3="0.92894594" z3="2.34753026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80925219" y3="0.44003372" z3="-4.29331652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78623595" y3="-0.5288752" z3="-4.47844432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43132045" y3="-1.72107464" z3="-5.09869689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14038793" y3="-1.94964163" z3="-5.56568813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8292958" y3="-0.97723584" z3="-5.35991365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06009975" y3="1.36343231" z3="-3.76462734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80711331" y3="-0.38244394" z3="-4.12785271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4396758" y3="-2.77300985" z3="-5.244659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09564567" y3="-2.89057716" z3="-6.06331225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85336081" y3="-1.162658" z3="-5.68613123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38834019" y3="-1.93809267" z3="5.05607201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30828986" y3="-3.75838214" z3="3.9236862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21215897" y3="-3.67136499" z3="-6.02641723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44303915" y3="-2.69319003" z3="-4.56436532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05929788" y3="1.17121268" z3="-1.4782703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09519098" y3="1.55878369" z3="-2.45390609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42428828" y3="1.51855095" z3="-1.67141644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82744623" y3="2.20029444" z3="-2.79343307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15321357" y3="1.22178234" z3="-0.91095478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88106713" y3="2.45696081" z3="-2.93381878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54856264" y3="2.2454727" z3="-3.61466843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87672576" y3="2.5569386" z3="-3.77969599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82486051" y3="2.5169659" z3="-4.38672433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20292949" y3="3.07881136" z3="-4.68378686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37047401" y3="3.13939286" z3="-3.29644717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25130594" y3="3.5500004" z3="-4.0790845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16795829" y3="4.15112358" z3="-2.69085471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90443824" y3="5.48369446" z3="-2.89979285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99896086" y3="3.86301383" z3="-2.04511211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53375795" y3="6.23979477" z3="-2.42227148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0131261" y3="4.93598859" z3="-4.28936064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82443754" y3="5.8859616" z3="-3.72098374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15904121" y3="5.23229326" z3="-4.90623539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63043644" y3="6.94898287" z3="-3.88698362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47431659" y3="-2.17056037" z3="-0.2994683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45251286" y3="-2.96925941" z3="-1.06047793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00190684" y3="-2.54263144" z3="0.59355394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08568934" y3="-1.35035425" z3="-0.72144222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17195724" y3="-1.41373116" z3="-1.16553746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30445599" y3="-0.37385345" z3="-1.51782627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09524135" y3="-1.5440531" z3="-0.96403963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42004477" y3="-2.0713949" z3="-2.0125401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3396,.028,-.1903;7.3838,.1627,.4211;6.6421,.4345,-.3362;4.7159,1.2253,-2.2496;4.3843,.4101,-1.1798;2.7181,.8303,-3.6516;3.6151,1.7357,-3.1156;1.3545,2.5736,-4.5854;1.546,1.2313,-4.359;.4728,2.907,-5.1415;2.9272,-.5006,-3.4447;3.098,.0072,-1.0005;2.4076,-1.1314,-2.0104;.9353,-1.0098,-1.836;3.1157,-2.4537,-1.8668;-.1375,-3.6002,.6603;-.0218,-5.2956,-4.7396;-.2484,-5.0261,-3.7044;-.8409,-4.3051,-1.0916;.7797,-4.6209,-2.8553;-1.5655,-5.0975,-3.2466;-1.8626,-4.7312,-1.9362;.4954,-4.2756,-1.5325;1.8139,-4.5553,-3.2018;-2.3675,-5.4088,-3.9195;-2.9,-4.7546,-1.5939;-1.0273,-3.844,.2254;-2.1658,-3.6257,.8715;-3.0551,-4.087,.4403;-2.1595,-3.485,2.338;-2.2155,-3.2909,5.1356;-3.359,-3.6726,3.0416;-.9877,-3.2072,3.0595;-1.0132,-3.1107,4.4479;-3.3865,-3.5772,4.4302;-4.278,-3.9022,2.4936;-.0256,-3.0891,2.5551;-.0808,-2.9159,4.9868;-4.3272,-3.7346,4.9655;-2.235,-3.2232,6.2269;1.4199,-3.9141,-.6315;2.1824,-3.4206,-1.0883;.5123,.2219,-4.7063;-3.0721,-1.6985,.0102;-2.8862,-.9413,1.1662;-1.8182,-.2951,1.489;-.3395,.5699,1.1926;-.3984,1.4499,-.4449;1.003,-.6915,1.3987;-.3327,1.7822,2.6209;-3.8566,-.9195,2.0693;-3.6163,-.3006,3.3237;-.1754,.7466,-1.2641;.3932,2.2215,-.4495;-1.3667,1.9545,-.6111;1.0152,-1.0518,2.4409;1.9814,-.2359,1.1709;.8819,-1.5352,.7002;-.3964,1.2576,3.5905;.6043,2.3676,2.6167;-1.1724,2.4961,2.5551;-2.755,-.7617,3.834;-4.5297,-.4639,3.9113;-3.4374,.7798,3.197;4.8464,-.7373,.9893;4.4137,-2.061,.8447;3.7621,-2.7102,1.8859;3.5611,-2.0233,3.0786;4.0485,-.7362,3.2801;4.6989,-.1001,2.2275;4.5129,-2.5535,-.1235;3.36,-3.7154,1.758;2.7006,-2.6243,4.1026;3.8731,-.2319,4.2301;5.0471,.9289,2.3475;-.8093,.44,-4.2933;-1.7862,-.5289,-4.4784;-1.4313,-1.7211,-5.0987;-.1404,-1.9496,-5.5657;.8293,-.9772,-5.3599;-1.0601,1.3634,-3.7646;-2.8071,-.3824,-4.1279;-2.4397,-2.773,-5.2447;.0956,-2.8906,-6.0633;1.8534,-1.1627,-5.6861;2.3883,-1.9381,5.0561;2.3083,-3.7584,3.9237;-2.2122,-3.6714,-6.0264;-3.443,-2.6932,-4.5644;7.0593,1.1712,-1.4783;6.0952,1.5588,-2.4539;8.4243,1.5186,-1.6714;8.8274,2.2003,-2.7934;9.1532,1.2218,-.911;9.8811,2.457,-2.9338;6.5486,2.2455,-3.6147;7.8767,2.5569,-3.7797;5.8249,2.517,-4.3867;8.2029,3.0788,-4.6838;3.3705,3.1394,-3.2964;2.2513,3.55,-4.0791;4.168,4.1511,-2.6909;3.9044,5.4837,-2.8998;4.999,3.863,-2.0451;4.5338,6.2398,-2.4223;2.0131,4.936,-4.2894;2.8244,5.886,-3.721;1.159,5.2323,-4.9062;2.6304,6.949,-3.887;-4.4743,-2.1706,-.2995;-4.4525,-2.9693,-1.0605;-5.0019,-2.5426,.5936;-5.0857,-1.3504,-.7214;-2.172,-1.4137,-1.1655;-2.3045,-.3739,-1.5178;-1.0952,-1.5441,-.964;-2.42,-2.0714,-2.0125;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650390672199</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001859965555 0.000335024450 0.023101779650 0.005338959726</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030324107 -0.000979641 0.000174678 0.000193183 0.000229354 0.000325356 0.000352291 0.000390717 0.000530132 0.000602988 0.000769477 0.000850574 0.000885844 0.000997869 0.001062730 0.001133924 0.001238081 0.001325422 0.001428555 0.001644162 0.001659534 0.001761089 0.001824913 0.002104168 0.002190074 0.002442865 0.002775995 0.002875344 0.002955770 0.003273149 0.003391664 0.003870251 0.004083523 0.004356758 0.005184263 0.005349212 0.005511515 0.005951575 0.006471677 0.006719345 0.007333982 0.007516325 0.007978946 0.008279113 0.008719198 0.009051803 0.009519640 0.009875582 0.010124849 0.011008136 0.011732644 0.012318787 0.012865552 0.013295272 0.013874625 0.014634698 0.015000702 0.015213020 0.015325906 0.015538871 0.016170023 0.016833452 0.018018625 0.018313726 0.018791375 0.019567661 0.019913801 0.020947281 0.021307912 0.022002668 0.022819167 0.024242665 0.024479772 0.025875703 0.026370290 0.026936900 0.028329667 0.028794280 0.030781381 0.031498658 0.032248307 0.033490059 0.034002845 0.035056172 0.037531618 0.038236117 0.039207279 0.039719707 0.040807715 0.043353845 0.043930473 0.043967243 0.045434010 0.048425534 0.049185810 0.049632797 0.050206006 0.051003497 0.052130250 0.052332831 0.052392409 0.052635396 0.053562598 0.054088751 0.054690261 0.055120709 0.055748731 0.056243342 0.056377801 0.056496652 0.057165481 0.058527468 0.059505905 0.060669164 0.061163150 0.061996060 0.062028278 0.062345876 0.064913249 0.065740617 0.065892705 0.066029194 0.067514068 0.071881175 0.073821133 0.074850051 0.076934439 0.080639127 0.083710407 0.085082271 0.085739777 0.086343060 0.087466565 0.089754454 0.090806490 0.093639509 0.094510595 0.095570279 0.095853913 0.097393885 0.097517435 0.098240650 0.099269461 0.099870620 0.100135267 0.101044227 0.101506742 0.102470819 0.103038099 0.103782102 0.104529781 0.106357334 0.106854345 0.107207169 0.108951419 0.109708892 0.110574742 0.112293687 0.113183919 0.114055928 0.117330839 0.118653902 0.119486151 0.121206525 0.123740991 0.125089147 0.126023135 0.130609779 0.133564728 0.134812921 0.141698444 0.142397663 0.145117790 0.146069349 0.146935149 0.149471167 0.150367252 0.151817298 0.153036405 0.158770949 0.160273436 0.172172165 0.172976370 0.175698458 0.182765189 0.183449037 0.187976860 0.188317871 0.191152833 0.193272868 0.196605816 0.197945698 0.202438145 0.205083175 0.206753422 0.209626854 0.209808826 0.212771844 0.213413813 0.216543326 0.218214120 0.224321006 0.225010585 0.229783869 0.233741077 0.234345174 0.234989851 0.243683499 0.254452003 0.256583742 0.260709752 0.265632572 0.278389710 0.282261580 0.286063643 0.288567349 0.292574843 0.299349660 0.304251993 0.305049443 0.306172027 0.313099642 0.314668948 0.321667507 0.322203011 0.329283817 0.345962369 0.348089109 0.350744245 0.354010271 0.354427464 0.360926495 0.361655726 0.377168317 0.377850840 0.388927773 0.408493917 0.421835315 0.426040598 0.450493546 0.466289073 0.468640372 0.475621361 0.480465939 0.480948795 0.487350494 0.502505999 0.508539672 0.533414663 0.564627568 0.567242220 0.585242556 0.592175017 0.598925390 0.603254242 0.637197066 0.641480785 0.644367067 0.669163203 0.672508051 0.683753066 0.685854062 0.691241606 0.698050901 0.703818054 0.713672580 0.724332479 0.738687267 0.749937510 0.759365463 0.771851015 0.776666172 0.805737886 0.809500579 0.812687685 0.815362907 0.820069382 0.821777039 0.829422842 0.830839459 0.831626851 0.841101134 0.844906764 0.845855805 0.851806462 0.857572584 0.863619023 0.864629194 0.870713076 0.874268823 0.883343185 0.887453143 0.891635625 0.895892737 0.917972257 0.922150689 0.930561331 0.932288449 0.963841431 0.975226861 0.983883063 0.999159441 1.011059208 1.024329845 1.039966008 1.047590922 1.054114701 1.060415200 1.085383938 1.086170193 1.096661773 1.104773150 1.111233114 1.112244093 1.122729793 1.123602267 1.135011338 1.139012714 1.170366002 1.170630569 1.179041954 1.185526518 1.194064898 1.213401762 1.220066005 1.264937182 1.295659803 1.313530797 1.324089925 1.325432492 1.327784445 1.328990892 1.333722067 1.341311125 1.344113060 1.355525876 1.374704619 1.380368390 1.380943539 1.387770499 1.418435086 1.420095195 1.551018401 1.659975083 1.772193353</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">76</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33967441" y3="0.02609622" z3="-0.18960077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3838587" y3="0.16397139" z3="0.42210411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64158036" y3="0.43482863" z3="-0.33510359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71383942" y3="1.22232021" z3="-2.24849149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38359026" y3="0.4059977" z3="-1.17952167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71650042" y3="0.82668867" z3="-3.65167871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61248641" y3="1.73219167" z3="-3.11413249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35151053" y3="2.56909301" z3="-4.58355521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54419836" y3="1.22701292" z3="-4.35935027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46929172" y3="2.90279416" z3="-5.13858911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92642295" y3="-0.50374292" z3="-3.44564562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09793603" y3="0.00076282" z3="-1.00068284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40758895" y3="-1.13641895" z3="-2.01213392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93546117" y3="-1.01530106" z3="-1.83632567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11531885" y3="-2.45922768" z3="-1.87122145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13564627" y3="-3.59851395" z3="0.6578538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02327959" y3="-5.30130737" z3="-4.73943149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24947544" y3="-5.03030949" z3="-3.70468583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84073343" y3="-4.30538619" z3="-1.09279739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7792088" y3="-4.62608137" z3="-2.8558106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56656923" y3="-5.09917837" z3="-3.24687192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86305208" y3="-4.73080193" z3="-1.93704542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49561503" y3="-4.27925846" z3="-1.53347647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81326505" y3="-4.56210105" z3="-3.20203981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36870455" y3="-5.4104431" z3="-3.91941617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90030698" y3="-4.75225233" z3="-1.5947893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02612316" y3="-3.84209372" z3="0.22357808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16398568" y3="-3.62259712" z3="0.87037314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05438902" y3="-4.0833075" z3="0.43967164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15698231" y3="-3.4805795" z3="2.33665072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21370452" y3="-3.28205244" z3="5.1335706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35590884" y3="-3.66626205" z3="3.04061921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98626374" y3="-3.20251333" z3="3.05740699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0118507" y3="-3.10424083" z3="4.44559903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38330814" y3="-3.5691086" z3="4.42894808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27376912" y3="-3.89620511" z3="2.49318289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02449549" y3="-3.08631096" z3="2.55285499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08015908" y3="-2.90972299" z3="4.9841785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32412383" y3="-3.72407531" z3="4.96440002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23308671" y3="-3.21316737" z3="6.22479425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4214499" y3="-3.91932328" z3="-0.63273418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18214076" y3="-3.42553161" z3="-1.09016129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51097035" y3="0.21855961" z3="-4.7070769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07002658" y3="-1.69500145" z3="0.00804107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88319127" y3="-0.93670998" z3="1.16267647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81710403" y3="-0.28906505" z3="1.48419856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33480823" y3="0.57354389" z3="1.18853028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39105697" y3="1.44909638" z3="-0.45142748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00711256" y3="-0.68868258" z3="1.40077576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33074265" y3="1.78947144" z3="2.61376123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85237539" y3="-0.91481357" z3="2.06642251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61251156" y3="-0.29349164" z3="3.31870021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17429486" y3="0.73922024" z3="-1.26925778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.40588661" y3="2.21701273" z3="-0.46173439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.35778453" y3="1.95638187" z3="-0.61621035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01611257" y3="-1.04814241" z3="2.44336266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98679587" y3="-0.23388315" z3="1.17557136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88767317" y3="-1.53302113" z3="0.70252376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40101753" y3="1.26688417" z3="3.58446985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60883286" y3="2.3718994" z3="2.61218477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16832588" y3="2.50648841" z3="2.54208085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75130236" y3="-0.75183789" z3="3.82996013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52498813" y3="-0.45668425" z3="3.90703866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43467079" y3="0.78642623" z3="3.1892887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84757623" y3="-0.74034775" z3="0.98996406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4058331" y3="-2.06209882" z3="0.83993682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75488633" y3="-2.71191847" z3="1.88116748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56431466" y3="-2.02803368" z3="3.07991731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06150204" y3="-0.74363215" z3="3.28694623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71116918" y3="-0.10671418" z3="2.23414963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49674864" y3="-2.55146668" z3="-0.13276488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34579818" y3="-3.71524997" z3="1.74901833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70403621" y3="-2.62826697" z3="4.10455583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89460754" y3="-0.24182327" z3="4.24199396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06688955" y3="0.92066681" z3="2.35889563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81054723" y3="0.43688963" z3="-4.29558775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78649413" y3="-0.53284639" z3="-4.4819213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43007116" y3="-1.72473867" z3="-5.10182464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13931672" y3="-1.95350397" z3="-5.56784207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82934299" y3="-0.98016324" z3="-5.35998801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06232298" y3="1.36008096" z3="-3.76806075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81030119" y3="-0.39068749" z3="-4.13040453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43787264" y3="-2.77658267" z3="-5.24794484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09749234" y3="-2.89406474" z3="-6.06554298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85480752" y3="-1.16343304" z3="-5.6866618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.39570283" y3="-1.94243597" z3="5.05980353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30758371" y3="-3.76107563" z3="3.92392184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20861101" y3="-3.67561896" z3="-6.02809851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44249859" y3="-2.69668068" z3="-4.56949765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05755855" y3="1.17166957" z3="-1.47697197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09261516" y3="1.5583301" z3="-2.45223704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42199314" y3="1.52067869" z3="-1.67001721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82385993" y3="2.20396313" z3="-2.79124277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15160391" y3="1.22406534" z3="-0.91013252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87710052" y3="2.46212758" z3="-2.93152119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54464859" y3="2.24699899" z3="-3.61200766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87236998" y3="2.56077641" z3="-3.7767044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82037892" y3="2.51855469" z3="-4.38350521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1975574" y3="3.08442325" z3="-4.6799867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36597161" y3="3.13576937" z3="-3.2919726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24631381" y3="3.54606495" z3="-4.07396069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16060263" y3="4.14801213" z3="-2.68222709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89232072" y3="5.48165795" z3="-2.88446442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99247935" y3="3.85972453" z3="-2.0376478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.51865079" y3="6.23848187" z3="-2.4027186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.00388438" y3="4.93301599" z3="-4.27812853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.81115556" y3="5.88428788" z3="-3.70393766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.14908898" y3="5.22930919" z3="-4.89401303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6127661" y3="6.94848826" z3="-3.86388185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47289773" y3="-2.16662294" z3="-0.2995497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45246638" y3="-2.96659089" z3="-1.05921799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00008523" y3="-2.53687377" z3="0.59435352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08414818" y3="-1.3467869" z3="-0.72240279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17142995" y3="-1.41239097" z3="-1.16928789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30430383" y3="-0.37345787" z3="-1.52310023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09470878" y3="-1.54202254" z3="-0.96934394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42067543" y3="-2.07123424" z3="-2.01471552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3397,.0261,-.1896;7.3839,.164,.4221;6.6416,.4348,-.3351;4.7138,1.2223,-2.2485;4.3836,.406,-1.1795;2.7165,.8267,-3.6517;3.6125,1.7322,-3.1141;1.3515,2.5691,-4.5836;1.5442,1.227,-4.3594;.4693,2.9028,-5.1386;2.9264,-.5037,-3.4456;3.0979,.0008,-1.0007;2.4076,-1.1364,-2.0121;.9355,-1.0153,-1.8363;3.1153,-2.4592,-1.8712;-.1356,-3.5985,.6579;-.0233,-5.3013,-4.7394;-.2495,-5.0303,-3.7047;-.8407,-4.3054,-1.0928;.7792,-4.6261,-2.8558;-1.5666,-5.0992,-3.2469;-1.8631,-4.7308,-1.937;.4956,-4.2793,-1.5335;1.8133,-4.5621,-3.202;-2.3687,-5.4104,-3.9194;-2.9003,-4.7523,-1.5948;-1.0261,-3.8421,.2236;-2.164,-3.6226,.8704;-3.0544,-4.0833,.4397;-2.157,-3.4806,2.3367;-2.2137,-3.2821,5.1336;-3.3559,-3.6663,3.0406;-.9863,-3.2025,3.0574;-1.0119,-3.1042,4.4456;-3.3833,-3.5691,4.4289;-4.2738,-3.8962,2.4932;-.0245,-3.0863,2.5529;-.0802,-2.9097,4.9842;-4.3241,-3.7241,4.9644;-2.2331,-3.2132,6.2248;1.4214,-3.9193,-.6327;2.1821,-3.4255,-1.0902;.511,.2186,-4.7071;-3.07,-1.695,.008;-2.8832,-.9367,1.1627;-1.8171,-.2891,1.4842;-.3348,.5735,1.1885;-.3911,1.4491,-.4514;1.0071,-.6887,1.4008;-.3307,1.7895,2.6138;-3.8524,-.9148,2.0664;-3.6125,-.2935,3.3187;-.1743,.7392,-1.2693;.4059,2.217,-.4617;-1.3578,1.9564,-.6162;1.0161,-1.0481,2.4434;1.9868,-.2339,1.1756;.8877,-1.533,.7025;-.401,1.2669,3.5845;.6088,2.3719,2.6122;-1.1683,2.5065,2.5421;-2.7513,-.7518,3.83;-4.525,-.4567,3.907;-3.4347,.7864,3.1893;4.8476,-.7403,.99;4.4058,-2.0621,.8399;3.7549,-2.7119,1.8812;3.5643,-2.028,3.0799;4.0615,-.7436,3.2869;4.7112,-.1067,2.2341;4.4967,-2.5515,-.1328;3.3458,-3.7152,1.749;2.704,-2.6283,4.1046;3.8946,-.2418,4.242;5.0669,.9207,2.3589;-.8105,.4369,-4.2956;-1.7865,-.5328,-4.4819;-1.4301,-1.7247,-5.1018;-.1393,-1.9535,-5.5678;.8293,-.9802,-5.36;-1.0623,1.3601,-3.7681;-2.8103,-.3907,-4.1304;-2.4379,-2.7766,-5.2479;.0975,-2.8941,-6.0655;1.8548,-1.1634,-5.6867;2.3957,-1.9424,5.0598;2.3076,-3.7611,3.9239;-2.2086,-3.6756,-6.0281;-3.4425,-2.6967,-4.5695;7.0576,1.1717,-1.477;6.0926,1.5583,-2.4522;8.422,1.5207,-1.67;8.8239,2.204,-2.7912;9.1516,1.2241,-.9101;9.8771,2.4621,-2.9315;6.5446,2.247,-3.612;7.8724,2.5608,-3.7767;5.8204,2.5186,-4.3835;8.1976,3.0844,-4.68;3.366,3.1358,-3.292;2.2463,3.5461,-4.074;4.1606,4.148,-2.6822;3.8923,5.4817,-2.8845;4.9925,3.8597,-2.0376;4.5187,6.2385,-2.4027;2.0039,4.933,-4.2781;2.8112,5.8843,-3.7039;1.1491,5.2293,-4.894;2.6128,6.9485,-3.8639;-4.4729,-2.1666,-.2995;-4.4525,-2.9666,-1.0592;-5.0001,-2.5369,.5944;-5.0841,-1.3468,-.7224;-2.1714,-1.4124,-1.1693;-2.3043,-.3735,-1.5231;-1.0947,-1.542,-.9693;-2.4207,-2.0712,-2.0147;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650378257016</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002001614668 0.000381826819 0.015271584471 0.005335301997</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030324264 -0.001156992 0.000174485 0.000198276 0.000228946 0.000325349 0.000356997 0.000389309 0.000530093 0.000618694 0.000769652 0.000851033 0.000886810 0.001014215 0.001074228 0.001139990 0.001239576 0.001336782 0.001468960 0.001647202 0.001688161 0.001824899 0.001963509 0.002121550 0.002195392 0.002453911 0.002769298 0.002889378 0.003076129 0.003302138 0.003396722 0.003892023 0.004138758 0.004357335 0.005284556 0.005349892 0.005518828 0.005956066 0.006471285 0.006728774 0.007371701 0.007525827 0.007984299 0.008354527 0.008719531 0.009053378 0.009519392 0.009875353 0.010165859 0.011008304 0.011738222 0.012321086 0.012868679 0.013295726 0.013892962 0.014633108 0.015006672 0.015214661 0.015328822 0.015538952 0.016169633 0.016841878 0.018020168 0.018335126 0.018790739 0.019593862 0.019931962 0.020955511 0.021318355 0.022008482 0.022819725 0.024243813 0.024501039 0.025875920 0.026370204 0.026938087 0.028335816 0.028797109 0.030789826 0.031498708 0.032248263 0.033491649 0.034006700 0.035073372 0.037536460 0.038240675 0.039213260 0.039720651 0.040811368 0.043365925 0.043935541 0.043984366 0.045437610 0.048461943 0.049185703 0.049638751 0.050207274 0.051004337 0.052130908 0.052334487 0.052393259 0.052635272 0.053562387 0.054088408 0.054693184 0.055123489 0.055806345 0.056319689 0.056397435 0.056528339 0.057173278 0.058539745 0.059505994 0.060684663 0.061163192 0.062001108 0.062029947 0.062346836 0.064914178 0.065740699 0.065910851 0.066028808 0.067515005 0.071891190 0.073822140 0.074851383 0.076934490 0.080640794 0.083710101 0.085097558 0.085744135 0.086343172 0.087466334 0.089757864 0.090815887 0.093703880 0.094510933 0.095570405 0.095854033 0.097393899 0.097523013 0.098262650 0.099273162 0.099870620 0.100138528 0.101046164 0.101507813 0.102483486 0.103074737 0.103785729 0.104530408 0.106378299 0.106884196 0.107213789 0.108955287 0.109708876 0.110580129 0.112301395 0.113186194 0.114057568 0.117346039 0.118659681 0.119507863 0.121214441 0.123742718 0.125090951 0.126022898 0.130609953 0.133595017 0.134814169 0.141707198 0.142402670 0.145130913 0.146072508 0.147478739 0.149481329 0.150469018 0.151972673 0.153430793 0.158771308 0.160278811 0.172176638 0.172978907 0.175710424 0.182790739 0.183474124 0.188044510 0.188354015 0.191170134 0.193273675 0.196624568 0.197945830 0.202465127 0.205083510 0.206753420 0.209629133 0.209812741 0.212817447 0.213429619 0.216549752 0.218307065 0.224321090 0.225016519 0.229787452 0.233742022 0.234345688 0.234991806 0.243684017 0.254487489 0.256583712 0.260732565 0.265638463 0.278395412 0.282261576 0.286064747 0.288582085 0.292583954 0.299385127 0.304261664 0.305053677 0.306177936 0.313231721 0.314691877 0.321685066 0.322305731 0.329287487 0.345980876 0.348119810 0.350754020 0.354010785 0.354451531 0.360942274 0.361670675 0.377193648 0.377853696 0.388981478 0.408521651 0.421835683 0.426049536 0.450493627 0.466288828 0.468640365 0.475621642 0.480489670 0.480954196 0.487383412 0.502515917 0.508541111 0.533414629 0.564627612 0.567242631 0.585262841 0.592178538 0.598969770 0.603254390 0.637255399 0.641517845 0.644380018 0.669171547 0.672537700 0.683753122 0.685882885 0.691242396 0.698072273 0.703818056 0.713759393 0.724720333 0.738690128 0.749938274 0.759385780 0.771851132 0.776675822 0.805738088 0.809504602 0.812717446 0.815409102 0.820070353 0.821850013 0.829434315 0.830843460 0.831651700 0.841118098 0.844906769 0.845868631 0.851990465 0.857579840 0.863628930 0.864635118 0.870742126 0.874299502 0.883343668 0.887462801 0.891636005 0.895909443 0.917985645 0.922151089 0.930572185 0.932295916 0.963841422 0.975251277 0.983925398 0.999195203 1.011076264 1.024332599 1.039996144 1.047594946 1.054134517 1.060416600 1.085392855 1.086213196 1.096674885 1.104778521 1.111239205 1.112244290 1.122730357 1.123605946 1.135014282 1.139026165 1.170425589 1.170644691 1.179050860 1.185542642 1.194065863 1.213402895 1.220087998 1.265146349 1.295671658 1.313543498 1.324139897 1.325468333 1.327947603 1.329185226 1.333801500 1.341460755 1.344154558 1.355544130 1.374774221 1.380371160 1.380947898 1.387786669 1.418439403 1.420144485 1.551024615 1.659978964 1.772193950</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">77</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34057889" y3="0.01882936" z3="-0.18985647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38463173" y3="0.1606737" z3="0.42120444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64158332" y3="0.43065826" z3="-0.33551951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71162881" y3="1.21917336" z3="-2.24586781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38350272" y3="0.39930942" z3="-1.17857348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71427531" y3="0.8234408" z3="-3.64899727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60831402" y3="1.72960795" z3="-3.10877151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34521866" y3="2.56712334" z3="-4.57460383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54137783" y3="1.22396009" z3="-4.35531018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46283052" y3="2.9001544" z3="-5.12982923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92690513" y3="-0.5077057" z3="-3.44672618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09855491" y3="-0.0081593" z3="-1.00021855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40927578" y3="-1.14414159" z3="-2.0139927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93694644" y3="-1.02464133" z3="-1.83756392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11846648" y3="-2.46629815" z3="-1.87523356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13450336" y3="-3.59668505" z3="0.65542446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02739447" y3="-5.30623251" z3="-4.74063843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2525804" y3="-5.03372977" z3="-3.70601258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84133557" y3="-4.30423774" z3="-1.09449468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77766096" y3="-4.63224833" z3="-2.85743328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5702733" y3="-5.09745798" z3="-3.24808082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86533733" y3="-4.72690059" z3="-1.93846964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49523872" y3="-4.28294968" z3="-1.53535639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8123421" y3="-4.57267791" z3="-3.20389708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37402491" y3="-5.40608713" z3="-3.92041066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90314111" y3="-4.74378941" z3="-1.59630192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02547362" y3="-3.83915544" z3="0.22146759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16318583" y3="-3.61843959" z3="0.86841069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05311911" y3="-4.08040457" z3="0.4390498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15553491" y3="-3.47515854" z3="2.33468779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21120266" y3="-3.27390359" z3="5.1315897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35331727" y3="-3.66212503" z3="3.0394601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9851321" y3="-3.19485616" z3="3.05474454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01043192" y3="-3.0949886" z3="4.44285779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38052879" y3="-3.56324257" z3="4.42767559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27065906" y3="-3.8944763" z3="2.49266041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02454167" y3="-3.07712013" z3="2.54938336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07928072" y3="-2.8985882" z3="4.98115193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32008259" y3="-3.71990334" z3="4.96370757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23048467" y3="-3.20345761" z3="6.2227073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42247245" y3="-3.92495187" z3="-0.63524996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18515971" y3="-3.43383114" z3="-1.093392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51016036" y3="0.21388845" z3="-4.70715003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06935053" y3="-1.69241798" z3="0.0052883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87945606" y3="-0.9330827" z3="1.15905856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80898383" y3="-0.28931315" z3="1.47782148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33089624" y3="0.57639427" z3="1.18383294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.38282536" y3="1.44748846" z3="-0.45880983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01202598" y3="-0.68232052" z3="1.40246818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33055716" y3="1.79669409" z3="2.60547406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84783408" y3="-0.90670426" z3="2.06404563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60400197" y3="-0.28454396" z3="3.31593659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16308702" y3="0.73894449" z3="-1.27360561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.41380057" y3="2.2138802" z3="-0.46712963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.34768927" y3="1.95818809" z3="-0.62891573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0187031" y3="-1.04034684" z3="2.44545134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9910088" y3="-0.22640173" z3="1.17925704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89599226" y3="-1.52759067" z3="0.70499847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40285067" y3="1.27768163" z3="3.57762198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61011439" y3="2.37798646" z3="2.6038857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16694772" y3="2.5147292" z3="2.5302955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74310977" y3="-0.74637302" z3="3.82618735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5169824" y3="-0.44357206" z3="3.90550531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42227952" y3="0.79517897" z3="3.18566215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85025478" y3="-0.7479436" z3="0.98992239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.409107" y3="-2.06849167" z3="0.84319764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75815277" y3="-2.71704114" z3="1.88511916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56604166" y3="-2.03262155" z3="3.08045273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0629281" y3="-0.74950449" z3="3.28413304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71268142" y3="-0.11394803" z3="2.23084735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50161631" y3="-2.55884774" z3="-0.12657246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34910793" y3="-3.71937671" z3="1.75543502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70617662" y3="-2.63170895" z3="4.10613972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89533512" y3="-0.24724988" z3="4.23653932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06856676" y3="0.91228495" z3="2.35312792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81251682" y3="0.43024191" z3="-4.29701597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78807651" y3="-0.53927339" z3="-4.48552559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43049366" y3="-1.7302667" z3="-5.10609114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13837607" y3="-1.95704664" z3="-5.57087521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82978712" y3="-0.9839201" z3="-5.36142034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06650933" y3="1.35264406" z3="-3.7672155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80899527" y3="-0.39318917" z3="-4.13686515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43720797" y3="-2.78323708" z3="-5.25492434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09944542" y3="-2.89711322" z3="-6.06857202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85432347" y3="-1.16838843" z3="-5.68581157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.39943365" y3="-1.94555069" z3="5.06145785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30898296" y3="-3.76394067" z3="3.92682725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20561405" y3="-3.68228431" z3="-6.03478191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44315418" y3="-2.70378167" z3="-4.57803385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05574259" y3="1.17133592" z3="-1.47618082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08960734" y3="1.5584502" z3="-2.45002625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41955522" y3="1.52444362" z3="-1.6690363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81960054" y3="2.21216753" z3="-2.78876816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15008798" y3="1.22761436" z3="-0.91012891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87238011" y3="2.47362002" z3="-2.92884308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53970813" y3="2.25138001" z3="-3.60845921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86683115" y3="2.5689765" z3="-3.77301498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.814425" y3="2.5229436" z3="-4.37903403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19062907" y3="3.09586798" z3="-4.6752114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35810002" y3="3.13362996" z3="-3.28123488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2375649" y3="3.54442952" z3="-4.06169361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.15149794" y3="4.14478944" z3="-2.66934024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88310461" y3="5.4769191" z3="-2.87068092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.98363267" y3="3.85610072" z3="-2.02537562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5094965" y3="6.23228404" z3="-2.38873927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99391675" y3="4.93051904" z3="-4.26351915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.80156656" y3="5.87970046" z3="-3.6895395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.13878689" y3="5.22712466" z3="-4.87874144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.60377525" y3="6.94237998" z3="-3.84947799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47319478" y3="-2.16235584" z3="-0.29979279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45485937" y3="-2.96340493" z3="-1.05841589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99951331" y3="-2.53064595" z3="0.59543883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08391027" y3="-1.34208809" z3="-0.72271029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17187786" y3="-1.41097274" z3="-1.17298315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30298083" y3="-0.37118724" z3="-1.52628654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09498739" y3="-1.54336701" z3="-0.97403689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42337226" y3="-2.06920668" z3="-2.01826225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3406,.0188,-.1899;7.3846,.1607,.4212;6.6416,.4307,-.3355;4.7116,1.2192,-2.2459;4.3835,.3993,-1.1786;2.7143,.8234,-3.649;3.6083,1.7296,-3.1088;1.3452,2.5671,-4.5746;1.5414,1.224,-4.3553;.4628,2.9002,-5.1298;2.9269,-.5077,-3.4467;3.0986,-.0082,-1.0002;2.4093,-1.1441,-2.014;.9369,-1.0246,-1.8376;3.1185,-2.4663,-1.8752;-.1345,-3.5967,.6554;-.0274,-5.3062,-4.7406;-.2526,-5.0337,-3.706;-.8413,-4.3042,-1.0945;.7777,-4.6322,-2.8574;-1.5703,-5.0975,-3.2481;-1.8653,-4.7269,-1.9385;.4952,-4.2829,-1.5354;1.8123,-4.5727,-3.2039;-2.374,-5.4061,-3.9204;-2.9031,-4.7438,-1.5963;-1.0255,-3.8392,.2215;-2.1632,-3.6184,.8684;-3.0531,-4.0804,.439;-2.1555,-3.4752,2.3347;-2.2112,-3.2739,5.1316;-3.3533,-3.6621,3.0395;-.9851,-3.1949,3.0547;-1.0104,-3.095,4.4429;-3.3805,-3.5632,4.4277;-4.2707,-3.8945,2.4927;-.0245,-3.0771,2.5494;-.0793,-2.8986,4.9812;-4.3201,-3.7199,4.9637;-2.2305,-3.2035,6.2227;1.4225,-3.925,-.6352;2.1852,-3.4338,-1.0934;.5102,.2139,-4.7072;-3.0694,-1.6924,.0053;-2.8795,-.9331,1.1591;-1.809,-.2893,1.4778;-.3309,.5764,1.1838;-.3828,1.4475,-.4588;1.012,-.6823,1.4025;-.3306,1.7967,2.6055;-3.8478,-.9067,2.064;-3.604,-.2845,3.3159;-.1631,.7389,-1.2736;.4138,2.2139,-.4671;-1.3477,1.9582,-.6289;1.0187,-1.0403,2.4455;1.991,-.2264,1.1793;.896,-1.5276,.705;-.4029,1.2777,3.5776;.6101,2.378,2.6039;-1.1669,2.5147,2.5303;-2.7431,-.7464,3.8262;-4.517,-.4436,3.9055;-3.4223,.7952,3.1857;4.8503,-.7479,.9899;4.4091,-2.0685,.8432;3.7582,-2.717,1.8851;3.566,-2.0326,3.0805;4.0629,-.7495,3.2841;4.7127,-.1139,2.2308;4.5016,-2.5588,-.1266;3.3491,-3.7194,1.7554;2.7062,-2.6317,4.1061;3.8953,-.2472,4.2365;5.0686,.9123,2.3531;-.8125,.4302,-4.297;-1.7881,-.5393,-4.4855;-1.4305,-1.7303,-5.1061;-.1384,-1.957,-5.5709;.8298,-.9839,-5.3614;-1.0665,1.3526,-3.7672;-2.809,-.3932,-4.1369;-2.4372,-2.7832,-5.2549;.0994,-2.8971,-6.0686;1.8543,-1.1684,-5.6858;2.3994,-1.9456,5.0615;2.309,-3.7639,3.9268;-2.2056,-3.6823,-6.0348;-3.4432,-2.7038,-4.578;7.0557,1.1713,-1.4762;6.0896,1.5585,-2.45;8.4196,1.5244,-1.669;8.8196,2.2122,-2.7888;9.1501,1.2276,-.9101;9.8724,2.4736,-2.9288;6.5397,2.2514,-3.6085;7.8668,2.569,-3.773;5.8144,2.5229,-4.379;8.1906,3.0959,-4.6752;3.3581,3.1336,-3.2812;2.2376,3.5444,-4.0617;4.1515,4.1448,-2.6693;3.8831,5.4769,-2.8707;4.9836,3.8561,-2.0254;4.5095,6.2323,-2.3887;1.9939,4.9305,-4.2635;2.8016,5.8797,-3.6895;1.1388,5.2271,-4.8787;2.6038,6.9424,-3.8495;-4.4732,-2.1624,-.2998;-4.4549,-2.9634,-1.0584;-4.9995,-2.5306,.5954;-5.0839,-1.3421,-.7227;-2.1719,-1.411,-1.173;-2.303,-.3712,-1.5263;-1.095,-1.5434,-.974;-2.4234,-2.0692,-2.0183;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650370668091</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002557862020 0.000400236174 0.027600838424 0.005339036820</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030324201 -0.001275689 0.000175152 0.000196698 0.000230996 0.000336837 0.000357099 0.000388860 0.000530164 0.000616422 0.000769819 0.000853303 0.000894758 0.001013745 0.001085805 0.001140264 0.001240190 0.001336112 0.001467673 0.001647263 0.001726287 0.001827829 0.001941509 0.002160797 0.002194339 0.002511042 0.002809448 0.002911157 0.003143533 0.003356827 0.003402193 0.003907583 0.004139393 0.004385002 0.005326890 0.005351604 0.005531269 0.005957938 0.006471987 0.006748551 0.007382476 0.007545443 0.007984387 0.008439204 0.008732885 0.009059176 0.009520728 0.009878401 0.010281009 0.011008349 0.011754420 0.012320975 0.012871774 0.013305815 0.013947385 0.014633986 0.015010000 0.015214934 0.015328138 0.015539293 0.016171815 0.016839573 0.018020135 0.018370208 0.018790241 0.019629563 0.019956628 0.020966033 0.021325689 0.022018432 0.022820577 0.024247244 0.024546280 0.025876773 0.026370529 0.026941676 0.028365998 0.028796960 0.030805281 0.031498802 0.032248983 0.033492722 0.034006979 0.035110227 0.037538070 0.038245247 0.039218146 0.039720852 0.040815610 0.043391252 0.043950889 0.044044142 0.045442548 0.048473083 0.049185889 0.049643755 0.050208375 0.051004352 0.052131599 0.052336967 0.052394060 0.052636201 0.053563104 0.054090834 0.054694245 0.055127106 0.055838983 0.056357978 0.056449631 0.056653478 0.057178455 0.058559599 0.059506478 0.060697351 0.061163205 0.062002594 0.062029261 0.062352084 0.064915390 0.065740789 0.065936762 0.066042393 0.067519864 0.071912688 0.073822159 0.074855063 0.076943193 0.080645420 0.083716971 0.085099604 0.085758721 0.086343347 0.087473070 0.089761565 0.090826119 0.093763349 0.094512727 0.095570354 0.095855630 0.097393984 0.097523559 0.098304121 0.099274184 0.099872736 0.100142588 0.101050793 0.101508149 0.102491347 0.103102379 0.103785811 0.104530857 0.106410705 0.106941930 0.107214501 0.108967832 0.109709068 0.110589699 0.112316912 0.113190036 0.114058563 0.117352091 0.118660207 0.119520850 0.121224134 0.123776084 0.125096382 0.126023130 0.130623209 0.133633772 0.134814394 0.141726920 0.142405421 0.145146146 0.146076485 0.147723553 0.149529472 0.150530276 0.152068135 0.153832037 0.158777188 0.160302256 0.172176469 0.172989528 0.175733576 0.182804094 0.183491199 0.188102533 0.188395694 0.191214221 0.193281507 0.196649965 0.197955893 0.202498836 0.205095758 0.206753422 0.209629134 0.209824892 0.212838508 0.213439384 0.216550148 0.218394038 0.224332635 0.225024868 0.229788211 0.233742160 0.234346444 0.234991647 0.243684018 0.254522660 0.256587558 0.260755046 0.265644354 0.278404824 0.282261951 0.286066358 0.288597498 0.292589390 0.299439371 0.304277553 0.305054647 0.306179748 0.313430047 0.314717624 0.321685063 0.322457174 0.329291293 0.345981008 0.348182810 0.350775632 0.354071778 0.354465899 0.360942622 0.361684295 0.377199274 0.377853539 0.388986371 0.408605739 0.421838420 0.426079278 0.450493771 0.466288830 0.468640370 0.475621794 0.480515926 0.480969507 0.487405662 0.502553229 0.508541123 0.533414598 0.564627945 0.567243613 0.585280609 0.592178516 0.598986967 0.603255063 0.637293659 0.641551975 0.644383769 0.669182560 0.672560220 0.683753589 0.685953616 0.691242917 0.698097412 0.703819521 0.713853871 0.725340037 0.738696862 0.749939298 0.759398187 0.771851386 0.776686133 0.805739511 0.809523296 0.812748701 0.815425810 0.820071509 0.821891927 0.829457262 0.830844313 0.831674322 0.841138463 0.844907614 0.845901576 0.852402744 0.857582154 0.863653465 0.864637509 0.870772945 0.874361477 0.883345758 0.887464754 0.891639049 0.895939279 0.918003310 0.922155248 0.930582058 0.932319888 0.963847245 0.975272466 0.983949836 0.999235670 1.011089869 1.024332624 1.040016789 1.047603846 1.054168481 1.060433087 1.085395277 1.086263493 1.096728368 1.104785831 1.111276223 1.112251912 1.122735187 1.123612365 1.135014276 1.139040536 1.170504272 1.170717612 1.179060158 1.185572687 1.194066985 1.213433279 1.220130860 1.265296850 1.295685249 1.313568859 1.324169919 1.325527221 1.328010881 1.329376434 1.333808789 1.341555618 1.344219952 1.355544055 1.374853782 1.380380802 1.380947682 1.387807243 1.418462152 1.420144431 1.551027642 1.659986067 1.772196867</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">78</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34213031" y3="0.01506202" z3="-0.19004603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38606351" y3="0.15647941" z3="0.41965595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64249105" y3="0.42759348" z3="-0.33599181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7107751" y3="1.2160798" z3="-2.24447258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38423676" y3="0.39567118" z3="-1.17776733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71228275" y3="0.81995969" z3="-3.64547152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60674572" y3="1.72544342" z3="-3.10672128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34184167" y3="2.56194486" z3="-4.56966712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5381061" y3="1.22021962" z3="-4.3500639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45831769" y3="2.89575181" z3="-5.12259869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92607043" y3="-0.51066892" z3="-3.44399302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09997986" y3="-0.0127794" z3="-0.99863972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41100535" y3="-1.14901518" z3="-2.01163447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93878484" y3="-1.03142442" z3="-1.83342925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12156303" y3="-2.47054109" z3="-1.87456386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13345423" y3="-3.59267191" z3="0.65194262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02848285" y3="-5.31049803" z3="-4.74097382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25318815" y3="-5.03658482" z3="-3.70662962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84099324" y3="-4.3031208" z3="-1.09609037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77726372" y3="-4.63589594" z3="-2.85842919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57045305" y3="-5.09802007" z3="-3.24856318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8651849" y3="-4.72511462" z3="-1.93956887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49554856" y3="-4.28523985" z3="-1.53668183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81161958" y3="-4.57816394" z3="-3.20483914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37408604" y3="-5.40675333" z3="-3.92035475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90254516" y3="-4.74018212" z3="-1.59752563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0245576" y3="-3.83599676" z3="0.21916707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16168615" y3="-3.61474189" z3="0.86666267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05239893" y3="-4.07623335" z3="0.43766803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15349386" y3="-3.47039513" z3="2.33281795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20749039" y3="-3.26777702" z3="5.12970567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35329496" y3="-3.65156718" z3="3.03770802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9804881" y3="-3.19480576" z3="3.05274321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00484443" y3="-3.09446693" z3="4.44086498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37955387" y3="-3.55206023" z3="4.42594385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27325717" y3="-3.87927306" z3="2.49098937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01793463" y3="-3.08212529" z3="2.54755514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07153176" y3="-2.90221962" z3="4.97904007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32100067" y3="-3.70367464" z3="4.96212835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22591618" y3="-3.19707712" z3="6.2208584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42355773" y3="-3.92939129" z3="-0.636523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18595446" y3="-3.43877153" z3="-1.09399883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50746346" y3="0.21086309" z3="-4.70233229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06802368" y3="-1.68820523" z3="0.00324449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87599178" y3="-0.92753706" z3="1.15564147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80700776" y3="-0.28250812" z3="1.47200763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.32561925" y3="0.58240567" z3="1.17891678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.37540866" y3="1.44825836" z3="-0.46624493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01589832" y3="-0.67842743" z3="1.40470802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33017773" y3="1.80658469" z3="2.59699942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.842519" y3="-0.90084477" z3="2.06219509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59694391" y3="-0.2777707" z3="3.31277872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1645644" y3="0.73018698" z3="-1.27988182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.42787136" y3="2.21046932" z3="-0.4822122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.33878981" y3="1.9605932" z3="-0.6336336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01860504" y3="-1.03524177" z3="2.44838153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.99723356" y3="-0.22449092" z3="1.18380628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89971542" y3="-1.52482627" z3="0.70795322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40269042" y3="1.29050647" z3="3.57056095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60637076" y3="2.39156974" z3="2.59594813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1687413" y3="2.5198406" z3="2.51783335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73583605" y3="-0.73832053" z3="3.82264012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.50847417" y3="-0.43647987" z3="3.90387201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.41583716" y3="0.80125824" z3="3.18086044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85212104" y3="-0.75241816" z3="0.98950213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40991728" y3="-2.07326902" z3="0.84237368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75902289" y3="-2.72131718" z3="1.88474791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56887301" y3="-2.03663567" z3="3.08153732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06687711" y3="-0.75341851" z3="3.28550486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71647494" y3="-0.11839198" z3="2.23175496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50069289" y3="-2.56360361" z3="-0.12867648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34999766" y3="-3.72400475" z3="1.75552429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70864759" y3="-2.63480255" z3="4.10742126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90007155" y3="-0.250911" z3="4.23868819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07192222" y3="0.90826144" z3="2.35344428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81605604" y3="0.42687629" z3="-4.29609756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79061726" y3="-0.54431239" z3="-4.49156057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43039822" y3="-1.73464378" z3="-5.11250083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13716019" y3="-1.96121066" z3="-5.57183007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82973746" y3="-0.98626248" z3="-5.35698601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07046827" y3="1.34856659" z3="-3.76768698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8170402" y3="-0.40492765" z3="-4.14446117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43697955" y3="-2.78764654" z3="-5.26504354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10295444" y3="-2.90070682" z3="-6.07045355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85713478" y3="-1.16694251" z3="-5.6805384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.40351356" y3="-1.94845321" z3="5.06298726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30903292" y3="-3.7664701" z3="3.92746335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20218515" y3="-3.68732671" z3="-6.04313508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44613625" y3="-2.70852098" z3="-4.59305701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05507794" y3="1.17029956" z3="-1.47564827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08800055" y3="1.55767922" z3="-2.44841401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41798753" y3="1.52522339" z3="-1.66866677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81621287" y3="2.2147285" z3="-2.78747168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1494074" y3="1.22833417" z3="-0.91064827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.86828129" y3="2.47735385" z3="-2.92773172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5362564" y3="2.25315882" z3="-3.60570308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86251502" y3="2.57230434" z3="-3.77049996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81022167" y3="2.52566827" z3="-4.37517994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18481457" y3="3.10119728" z3="-4.67183444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35588703" y3="3.12840568" z3="-3.27842424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23394472" y3="3.53863627" z3="-4.05717769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.14664334" y3="4.14029541" z3="-2.66317108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.87071065" y3="5.47484682" z3="-2.85495917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.98004179" y3="3.85168903" z3="-2.02065318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.49288361" y3="6.23198617" z3="-2.3673798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.98481897" y3="4.92600948" z3="-4.25225431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.7870152" y3="5.8779629" z3="-3.67096713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.12792743" y3="5.22269982" z3="-4.86515389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.5818786" y3="6.94322445" z3="-3.82187715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47270523" y3="-2.15787287" z3="-0.29893565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45610275" y3="-2.96008665" z3="-1.05629765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99796411" y3="-2.5246633" z3="0.59744672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08365447" y3="-1.33808329" z3="-0.72234681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17256096" y3="-1.40908185" z3="-1.17744847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30417887" y3="-0.3701505" z3="-1.53191008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09549123" y3="-1.54115048" z3="-0.98062872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42619064" y3="-2.0682937" z3="-2.02128041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3421,.0151,-.19;7.3861,.1565,.4197;6.6425,.4276,-.336;4.7108,1.2161,-2.2445;4.3842,.3957,-1.1778;2.7123,.82,-3.6455;3.6067,1.7254,-3.1067;1.3418,2.5619,-4.5697;1.5381,1.2202,-4.3501;.4583,2.8958,-5.1226;2.9261,-.5107,-3.444;3.1,-.0128,-.9986;2.411,-1.149,-2.0116;.9388,-1.0314,-1.8334;3.1216,-2.4705,-1.8746;-.1335,-3.5927,.6519;-.0285,-5.3105,-4.741;-.2532,-5.0366,-3.7066;-.841,-4.3031,-1.0961;.7773,-4.6359,-2.8584;-1.5705,-5.098,-3.2486;-1.8652,-4.7251,-1.9396;.4955,-4.2852,-1.5367;1.8116,-4.5782,-3.2048;-2.3741,-5.4068,-3.9204;-2.9025,-4.7402,-1.5975;-1.0246,-3.836,.2192;-2.1617,-3.6147,.8667;-3.0524,-4.0762,.4377;-2.1535,-3.4704,2.3328;-2.2075,-3.2678,5.1297;-3.3533,-3.6516,3.0377;-.9805,-3.1948,3.0527;-1.0048,-3.0945,4.4409;-3.3796,-3.5521,4.4259;-4.2733,-3.8793,2.491;-.0179,-3.0821,2.5476;-.0715,-2.9022,4.979;-4.321,-3.7037,4.9621;-2.2259,-3.1971,6.2209;1.4236,-3.9294,-.6365;2.186,-3.4388,-1.094;.5075,.2109,-4.7023;-3.068,-1.6882,.0032;-2.876,-.9275,1.1556;-1.807,-.2825,1.472;-.3256,.5824,1.1789;-.3754,1.4483,-.4662;1.0159,-.6784,1.4047;-.3302,1.8066,2.597;-3.8425,-.9008,2.0622;-3.5969,-.2778,3.3128;-.1646,.7302,-1.2799;.4279,2.2105,-.4822;-1.3388,1.9606,-.6336;1.0186,-1.0352,2.4484;1.9972,-.2245,1.1838;.8997,-1.5248,.708;-.4027,1.2905,3.5706;.6064,2.3916,2.5959;-1.1687,2.5198,2.5178;-2.7358,-.7383,3.8226;-4.5085,-.4365,3.9039;-3.4158,.8013,3.1809;4.8521,-.7524,.9895;4.4099,-2.0733,.8424;3.759,-2.7213,1.8847;3.5689,-2.0366,3.0815;4.0669,-.7534,3.2855;4.7165,-.1184,2.2318;4.5007,-2.5636,-.1287;3.35,-3.724,1.7555;2.7086,-2.6348,4.1074;3.9001,-.2509,4.2387;5.0719,.9083,2.3534;-.8161,.4269,-4.2961;-1.7906,-.5443,-4.4916;-1.4304,-1.7346,-5.1125;-.1372,-1.9612,-5.5718;.8297,-.9863,-5.357;-1.0705,1.3486,-3.7677;-2.817,-.4049,-4.1445;-2.437,-2.7876,-5.265;.103,-2.9007,-6.0705;1.8571,-1.1669,-5.6805;2.4035,-1.9485,5.063;2.309,-3.7665,3.9275;-2.2022,-3.6873,-6.0431;-3.4461,-2.7085,-4.5931;7.0551,1.1703,-1.4756;6.088,1.5577,-2.4484;8.418,1.5252,-1.6687;8.8162,2.2147,-2.7875;9.1494,1.2283,-.9106;9.8683,2.4774,-2.9277;6.5363,2.2532,-3.6057;7.8625,2.5723,-3.7705;5.8102,2.5257,-4.3752;8.1848,3.1012,-4.6718;3.3559,3.1284,-3.2784;2.2339,3.5386,-4.0572;4.1466,4.1403,-2.6632;3.8707,5.4748,-2.855;4.98,3.8517,-2.0207;4.4929,6.232,-2.3674;1.9848,4.926,-4.2523;2.787,5.878,-3.671;1.1279,5.2227,-4.8652;2.5819,6.9432,-3.8219;-4.4727,-2.1579,-.2989;-4.4561,-2.9601,-1.0563;-4.998,-2.5247,.5974;-5.0837,-1.3381,-.7223;-2.1726,-1.4091,-1.1774;-2.3042,-.3702,-1.5319;-1.0955,-1.5412,-.9806;-2.4262,-2.0683,-2.0213;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650346988810</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003749265671 0.000547990035 0.016932921109 0.005337065839</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030324658 -0.002311289 0.000174865 0.000197906 0.000236015 0.000348632 0.000356400 0.000390191 0.000530378 0.000635091 0.000771433 0.000859118 0.000895211 0.001021260 0.001085685 0.001143321 0.001239780 0.001352289 0.001481115 0.001649470 0.001763290 0.001831771 0.002077772 0.002160775 0.002219679 0.002523861 0.002877373 0.003049730 0.003146162 0.003358830 0.003447888 0.003938318 0.004151826 0.004487865 0.005331264 0.005352579 0.005540163 0.005958491 0.006475413 0.006762183 0.007384255 0.007578116 0.007984345 0.008537516 0.008840988 0.009087918 0.009527788 0.009880858 0.010575067 0.011010186 0.011838992 0.012321215 0.012871339 0.013326788 0.014036761 0.014635564 0.015015434 0.015215352 0.015328521 0.015540022 0.016174456 0.016844852 0.018020091 0.018403995 0.018790034 0.019668099 0.019971144 0.020965730 0.021329129 0.022030589 0.022821404 0.024266403 0.024704979 0.025882724 0.026373767 0.026965219 0.028464875 0.028797312 0.030849370 0.031500214 0.032258984 0.033492365 0.034010656 0.035152738 0.037539637 0.038253070 0.039221013 0.039723628 0.040816191 0.043400460 0.043952159 0.044099953 0.045441431 0.048471993 0.049187690 0.049646991 0.050209827 0.051007016 0.052132460 0.052338975 0.052395506 0.052637267 0.053565581 0.054095036 0.054694589 0.055131725 0.055863211 0.056366370 0.056478148 0.056953888 0.057193371 0.058580110 0.059509833 0.060701026 0.061165374 0.062003036 0.062041970 0.062374103 0.064918704 0.065745351 0.065957565 0.066190174 0.067539272 0.071941842 0.073824731 0.074858473 0.076954913 0.080659892 0.083726866 0.085103438 0.085798074 0.086353925 0.087494569 0.089772071 0.090840003 0.093804177 0.094513749 0.095571354 0.095857041 0.097395374 0.097528636 0.098376591 0.099274235 0.099892878 0.100173754 0.101099839 0.101508747 0.102491018 0.103101542 0.103786739 0.104532866 0.106452149 0.106998369 0.107240679 0.109000319 0.109709219 0.110627440 0.112331859 0.113195871 0.114059357 0.117351483 0.118660173 0.119519648 0.121240717 0.123823983 0.125097001 0.126024106 0.130650608 0.133783323 0.134816027 0.141750960 0.142405154 0.145149953 0.146089995 0.147703463 0.149700892 0.150523800 0.152250283 0.153807180 0.158795265 0.160337550 0.172188764 0.172999479 0.175759221 0.182803863 0.183490433 0.188117271 0.188552869 0.191316078 0.193305644 0.196654350 0.197972091 0.202530062 0.205118057 0.206753431 0.209629375 0.209844375 0.212841355 0.213458455 0.216550327 0.218413771 0.224349423 0.225029223 0.229788193 0.233742522 0.234361614 0.234991649 0.243685271 0.254537923 0.256593464 0.260778346 0.265644054 0.278416067 0.282263380 0.286070519 0.288615272 0.292612539 0.299637741 0.304335824 0.305055835 0.306187404 0.313640248 0.314727689 0.321688561 0.322814287 0.329291307 0.345993251 0.348260050 0.350815710 0.354286133 0.354485871 0.360942603 0.361692928 0.377199123 0.377919851 0.389046992 0.408747548 0.421862476 0.426090749 0.450493968 0.466300620 0.468640732 0.475624100 0.480519723 0.480983238 0.487418216 0.502622094 0.508548759 0.533414855 0.564628157 0.567253746 0.585351386 0.592180997 0.599002491 0.603269267 0.637316818 0.641565205 0.644384851 0.669256987 0.672584908 0.683754681 0.686088810 0.691243228 0.698117179 0.703824364 0.714001375 0.726359804 0.738714257 0.749941282 0.759413600 0.771855528 0.776695632 0.805753345 0.809545732 0.812782105 0.815436843 0.820074822 0.821945095 0.829487267 0.830847343 0.831684883 0.841152909 0.844909346 0.845958453 0.853192139 0.857582269 0.863679563 0.864637497 0.870817321 0.874462311 0.883347639 0.887465164 0.891639915 0.895947853 0.918017384 0.922186403 0.930583953 0.932369471 0.963850311 0.975277223 0.983952137 0.999268764 1.011104105 1.024334405 1.040019224 1.047616663 1.054233147 1.060470420 1.085395760 1.086310009 1.096802630 1.104794999 1.111358521 1.112275629 1.122750080 1.123624042 1.135014836 1.139057572 1.170542463 1.171069494 1.179101702 1.185604576 1.194068231 1.213553126 1.220179669 1.265295405 1.295704959 1.313589996 1.324273581 1.325629611 1.328047180 1.329403147 1.333808777 1.341555472 1.344357776 1.355550621 1.374874885 1.380440986 1.380962367 1.387877176 1.418490099 1.420162046 1.551030601 1.660006951 1.772201317</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">79</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34303966" y3="0.01199138" z3="-0.18846872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38765391" y3="0.1571992" z3="0.42036795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64292617" y3="0.42719112" z3="-0.33476847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70857899" y3="1.21452002" z3="-2.24132538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3840254" y3="0.39116446" z3="-1.1758251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71026867" y3="0.8167078" z3="-3.64334022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60203848" y3="1.72431221" z3="-3.10059826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33386419" y3="2.56023587" z3="-4.55947324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53545146" y3="1.21585529" z3="-4.34740722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45023174" y3="2.89215873" z3="-5.1134004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92677777" y3="-0.51443068" z3="-3.44491101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1003007" y3="-0.02030901" z3="-0.99714022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41216749" y3="-1.15509095" z3="-2.01292515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93989775" y3="-1.03829693" z3="-1.83378251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12317863" y3="-2.47665385" z3="-1.87836428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13163264" y3="-3.58909831" z3="0.64932348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02868586" y3="-5.31622256" z3="-4.7408772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25326676" y3="-5.04022705" z3="-3.70702076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84029887" y3="-4.30142571" z3="-1.09762071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77835336" y3="-4.64199024" z3="-2.85868573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57154514" y3="-5.0964624" z3="-3.24961207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86572953" y3="-4.72115621" z3="-1.94113785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49670325" y3="-4.28851868" z3="-1.53756429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81353576" y3="-4.588477" z3="-3.20474754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37625239" y3="-5.40349128" z3="-3.92137163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90374241" y3="-4.73200374" z3="-1.59948349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02319233" y3="-3.83185423" z3="0.21689379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16006948" y3="-3.61021307" z3="0.86482241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05062684" y3="-4.0724473" z3="0.43671837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15114605" y3="-3.46555263" z3="2.33096418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20539602" y3="-3.26182247" z3="5.12771661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.349562" y3="-3.64747164" z3="3.0361749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97941784" y3="-3.18899918" z3="3.0505557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00397021" y3="-3.08813693" z3="4.43864142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3760189" y3="-3.54734921" z3="4.4242848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26799439" y3="-3.87669053" z3="2.48977062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01822519" y3="-3.07545076" z3="2.54515637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07191567" y3="-2.89511273" z3="4.97681426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31636559" y3="-3.69950485" z3="4.96047316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22392766" y3="-3.19058143" z3="6.21879492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42527401" y3="-3.93414333" z3="-0.63747953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18833682" y3="-3.44488018" z3="-1.09582396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50717233" y3="0.20402678" z3="-4.70498966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06742387" y3="-1.68519843" z3="0.00105592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87273399" y3="-0.923862" z3="1.15266138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80001334" y3="-0.28186561" z3="1.46650133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.32209977" y3="0.58477843" z3="1.17380381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.36872332" y3="1.44560217" z3="-0.47424494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01946891" y3="-0.67357844" z3="1.40616441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33018113" y3="1.81580114" z3="2.58679608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.83819279" y3="-0.89402446" z3="2.0605033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.58951539" y3="-0.27050276" z3="3.31049745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.15217937" y3="0.73301609" z3="-1.28481643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.4304936" y3="2.20791812" z3="-0.48629031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.33090921" y3="1.96092794" z3="-0.64738036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01969554" y3="-1.02830814" z3="2.45041106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.00053765" y3="-0.2202046" z3="1.18650321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.90511078" y3="-1.5210691" z3="0.71082913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40650994" y3="1.30413733" z3="3.56286906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.6093815" y3="2.39932981" z3="2.58511208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16771628" y3="2.53202677" z3="2.50162711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7270984" y3="-0.73158978" z3="3.81846383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49998257" y3="-0.42842873" z3="3.90382716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4081341" y3="0.80857233" z3="3.17764398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85432895" y3="-0.75617816" z3="0.99110501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40541386" y3="-2.07512278" z3="0.84003197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75415374" y3="-2.72356775" z3="1.88185028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.570204" y3="-2.04103995" z3="3.08173162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.07564005" y3="-0.76031783" z3="3.28994655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.725436" y3="-0.12471152" z3="2.23648792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49137925" y3="-2.56313357" z3="-0.13331268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33940957" y3="-3.72441805" z3="1.74894736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71028239" y3="-2.63883627" z3="4.10807489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.9148362" y3="-0.25977979" z3="4.24633641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08717983" y3="0.90039839" z3="2.3622275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81796595" y3="0.41783429" z3="-4.30059307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79210482" y3="-0.55053672" z3="-4.49439876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43087726" y3="-1.73994954" z3="-5.1161826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13602531" y3="-1.9645257" z3="-5.57531373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8306195" y3="-0.99216871" z3="-5.36059114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07532526" y3="1.33885313" z3="-3.76979859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81406102" y3="-0.40477099" z3="-4.15132363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43619617" y3="-2.79287752" z3="-5.27162825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10515579" y3="-2.90340468" z3="-6.0740857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85631681" y3="-1.17579032" z3="-5.67978238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.40770376" y3="-1.95289391" z3="5.06524806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30901641" y3="-3.7696692" z3="3.92753332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19894385" y3="-3.69286477" z3="-6.04869703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44679936" y3="-2.7121874" z3="-4.60250434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05361219" y3="1.17062011" z3="-1.47443646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08522743" y3="1.55817092" z3="-2.44600877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41604621" y3="1.52661842" z3="-1.66817937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81272696" y3="2.21799768" z3="-2.78642096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14828776" y3="1.22912247" z3="-0.91119406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.86450141" y3="2.48159727" z3="-2.92720075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53181372" y3="2.25561584" z3="-3.6026546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.85778097" y3="2.57622398" z3="-3.7680161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80477129" y3="2.52823611" z3="-4.37122112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.17893948" y3="3.10636758" z3="-4.66889608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.34550891" y3="3.12878708" z3="-3.26488378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.22195489" y3="3.53940305" z3="-4.04109415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.13594128" y3="4.13943919" z3="-2.64906169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.86193645" y3="5.47047769" z3="-2.84302887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.97146935" y3="3.84999987" z3="-2.00962026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.48605143" y3="6.22499446" z3="-2.35833857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.97244912" y3="4.92499699" z3="-4.23532139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.77703982" y3="5.87331493" z3="-3.65756311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.11575802" y3="5.22082951" z3="-4.84868024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.57544543" y3="6.93474195" z3="-3.81220879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47275724" y3="-2.15372158" z3="-0.29859502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45810142" y3="-2.95752536" z3="-1.05439437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9974378" y3="-2.51802709" z3="0.59921824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08295678" y3="-1.33372851" z3="-0.72269195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17327049" y3="-1.40728146" z3="-1.18063554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30377087" y3="-0.36777056" z3="-1.53499281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09585194" y3="-1.54146784" z3="-0.98513161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42929867" y3="-2.06648279" z3="-2.02396266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.343,.012,-.1885;7.3877,.1572,.4204;6.6429,.4272,-.3348;4.7086,1.2145,-2.2413;4.384,.3912,-1.1758;2.7103,.8167,-3.6433;3.602,1.7243,-3.1006;1.3339,2.5602,-4.5595;1.5355,1.2159,-4.3474;.4502,2.8922,-5.1134;2.9268,-.5144,-3.4449;3.1003,-.0203,-.9971;2.4122,-1.1551,-2.0129;.9399,-1.0383,-1.8338;3.1232,-2.4767,-1.8784;-.1316,-3.5891,.6493;-.0287,-5.3162,-4.7409;-.2533,-5.0402,-3.707;-.8403,-4.3014,-1.0976;.7784,-4.642,-2.8587;-1.5715,-5.0965,-3.2496;-1.8657,-4.7212,-1.9411;.4967,-4.2885,-1.5376;1.8135,-4.5885,-3.2047;-2.3763,-5.4035,-3.9214;-2.9037,-4.732,-1.5995;-1.0232,-3.8319,.2169;-2.1601,-3.6102,.8648;-3.0506,-4.0724,.4367;-2.1511,-3.4656,2.331;-2.2054,-3.2618,5.1277;-3.3496,-3.6475,3.0362;-.9794,-3.189,3.0506;-1.004,-3.0881,4.4386;-3.376,-3.5473,4.4243;-4.268,-3.8767,2.4898;-.0182,-3.0755,2.5452;-.0719,-2.8951,4.9768;-4.3164,-3.6995,4.9605;-2.2239,-3.1906,6.2188;1.4253,-3.9341,-.6375;2.1883,-3.4449,-1.0958;.5072,.204,-4.705;-3.0674,-1.6852,.0011;-2.8727,-.9239,1.1527;-1.8,-.2819,1.4665;-.3221,.5848,1.1738;-.3687,1.4456,-.4742;1.0195,-.6736,1.4062;-.3302,1.8158,2.5868;-3.8382,-.894,2.0605;-3.5895,-.2705,3.3105;-.1522,.733,-1.2848;.4305,2.2079,-.4863;-1.3309,1.9609,-.6474;1.0197,-1.0283,2.4504;2.0005,-.2202,1.1865;.9051,-1.5211,.7108;-.4065,1.3041,3.5629;.6094,2.3993,2.5851;-1.1677,2.532,2.5016;-2.7271,-.7316,3.8185;-4.5,-.4284,3.9038;-3.4081,.8086,3.1776;4.8543,-.7562,.9911;4.4054,-2.0751,.84;3.7542,-2.7236,1.8819;3.5702,-2.041,3.0817;4.0756,-.7603,3.2899;4.7254,-.1247,2.2365;4.4914,-2.5631,-.1333;3.3394,-3.7244,1.7489;2.7103,-2.6388,4.1081;3.9148,-.2598,4.2463;5.0872,.9004,2.3622;-.818,.4178,-4.3006;-1.7921,-.5505,-4.4944;-1.4309,-1.7399,-5.1162;-.136,-1.9645,-5.5753;.8306,-.9922,-5.3606;-1.0753,1.3389,-3.7698;-2.8141,-.4048,-4.1513;-2.4362,-2.7929,-5.2716;.1052,-2.9034,-6.0741;1.8563,-1.1758,-5.6798;2.4077,-1.9529,5.0652;2.309,-3.7697,3.9275;-2.1989,-3.6929,-6.0487;-3.4468,-2.7122,-4.6025;7.0536,1.1706,-1.4744;6.0852,1.5582,-2.446;8.416,1.5266,-1.6682;8.8127,2.218,-2.7864;9.1483,1.2291,-.9112;9.8645,2.4816,-2.9272;6.5318,2.2556,-3.6027;7.8578,2.5762,-3.768;5.8048,2.5282,-4.3712;8.1789,3.1064,-4.6689;3.3455,3.1288,-3.2649;2.222,3.5394,-4.0411;4.1359,4.1394,-2.6491;3.8619,5.4705,-2.843;4.9715,3.85,-2.0096;4.4861,6.225,-2.3583;1.9724,4.925,-4.2353;2.777,5.8733,-3.6576;1.1158,5.2208,-4.8487;2.5754,6.9347,-3.8122;-4.4728,-2.1537,-.2986;-4.4581,-2.9575,-1.0544;-4.9974,-2.518,.5992;-5.083,-1.3337,-.7227;-2.1733,-1.4073,-1.1806;-2.3038,-.3678,-1.535;-1.0959,-1.5415,-.9851;-2.4293,-2.0665,-2.024;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650322934844</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004811215512 0.000672038457 0.026841969590 0.005336816899</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030325009 -0.002524978 0.000174765 0.000196678 0.000235660 0.000349344 0.000356334 0.000390129 0.000532177 0.000640060 0.000771968 0.000864873 0.000896604 0.001021830 0.001111963 0.001165359 0.001242583 0.001382976 0.001497386 0.001649423 0.001762295 0.001831894 0.002147995 0.002183442 0.002260511 0.002523700 0.002882778 0.003106433 0.003195273 0.003379878 0.003449233 0.003945365 0.004197991 0.004545420 0.005331015 0.005353395 0.005539110 0.005965162 0.006478387 0.006762549 0.007384163 0.007588109 0.007985079 0.008553323 0.008893527 0.009137173 0.009552330 0.009880564 0.010828921 0.011033871 0.012019934 0.012321070 0.012874089 0.013336292 0.014075814 0.014634782 0.015019240 0.015221994 0.015328497 0.015541670 0.016174179 0.016854630 0.018020400 0.018407779 0.018797020 0.019698973 0.019975363 0.020968322 0.021329208 0.022041229 0.022821891 0.024283349 0.024873246 0.025895563 0.026380594 0.027039581 0.028634595 0.028798165 0.030914252 0.031501609 0.032273512 0.033492849 0.034029304 0.035211383 0.037541805 0.038288158 0.039223097 0.039743829 0.040816559 0.043401560 0.043957047 0.044179789 0.045443380 0.048478563 0.049196928 0.049647270 0.050215100 0.051008067 0.052133065 0.052339317 0.052399053 0.052637457 0.053567787 0.054096787 0.054701340 0.055136252 0.055883595 0.056366458 0.056484701 0.057149920 0.057432757 0.058611692 0.059509105 0.060700610 0.061170416 0.062003147 0.062075016 0.062405484 0.064921715 0.065747634 0.065966874 0.066392479 0.067552739 0.071949601 0.073826806 0.074859036 0.076956582 0.080684923 0.083732520 0.085108529 0.085859232 0.086377126 0.087512089 0.089798978 0.090844287 0.093859586 0.094513606 0.095579254 0.095859656 0.097398309 0.097567174 0.098489904 0.099274312 0.099911397 0.100238071 0.101216944 0.101513648 0.102525720 0.103105245 0.103786972 0.104546987 0.106491793 0.107050480 0.107317434 0.109052111 0.109711776 0.110735954 0.112346329 0.113202961 0.114066910 0.117355916 0.118660254 0.119531631 0.121263939 0.123862084 0.125096767 0.126024054 0.130680224 0.133838376 0.134815946 0.141757637 0.142414212 0.145150434 0.146115162 0.147849903 0.149955236 0.150588267 0.152511122 0.154134908 0.158803744 0.160365808 0.172204049 0.173002825 0.175777194 0.182807221 0.183497872 0.188120911 0.188625816 0.191436702 0.193321643 0.196655991 0.197989094 0.202560940 0.205126470 0.206753477 0.209629828 0.209868381 0.212928894 0.213575051 0.216551440 0.218413205 0.224360282 0.225030605 0.229788161 0.233742550 0.234400658 0.234991597 0.243688876 0.254538929 0.256596940 0.260800871 0.265649508 0.278423948 0.282266957 0.286072098 0.288636929 0.292669100 0.300029339 0.304461466 0.305059619 0.306217355 0.313806490 0.314728042 0.321694225 0.323552144 0.329292746 0.346025305 0.348326627 0.350879156 0.354411966 0.354617372 0.360944924 0.361703516 0.377203703 0.378192908 0.389323280 0.408925981 0.421971429 0.426091351 0.450494138 0.466359816 0.468643060 0.475625886 0.480523630 0.480985004 0.487423361 0.502707540 0.508574985 0.533415056 0.564629716 0.567262583 0.585425682 0.592182373 0.599047439 0.603308337 0.637324275 0.641583727 0.644385109 0.669307557 0.672603697 0.683755210 0.686251799 0.691243265 0.698144636 0.703826134 0.714196859 0.728171146 0.738740630 0.749943863 0.759426880 0.771865778 0.776704486 0.805787757 0.809561526 0.812823394 0.815521968 0.820082468 0.822039949 0.829498984 0.830868281 0.831690831 0.841160134 0.844910114 0.846009423 0.854286988 0.857583104 0.863721065 0.864637820 0.870887094 0.874640993 0.883348191 0.887474262 0.891640328 0.895947747 0.918028446 0.922236859 0.930584065 0.932454992 0.963850724 0.975279498 0.983952081 0.999300317 1.011138177 1.024346114 1.040019182 1.047636595 1.054355009 1.060536962 1.085396752 1.086352346 1.096871607 1.104803395 1.111469892 1.112314759 1.122768002 1.123636639 1.135015661 1.139073127 1.170550682 1.171831013 1.179239782 1.185642516 1.194071559 1.213824830 1.220230177 1.265352194 1.295786441 1.313622102 1.324528567 1.325781288 1.328159898 1.329455879 1.333809130 1.341575043 1.344441654 1.355550971 1.374878124 1.380498833 1.380969529 1.388138531 1.418520714 1.420344597 1.551036348 1.660024709 1.772253985</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">80</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34397828" y3="0.00601323" z3="-0.18800384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38853945" y3="0.15566664" z3="0.42042131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64302859" y3="0.42395388" z3="-0.33457127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7062937" y3="1.20964061" z3="-2.23920267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38375479" y3="0.38454506" z3="-1.174674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70743147" y3="0.81280781" z3="-3.64016636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59926275" y3="1.71900678" z3="-3.09767832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33080132" y3="2.55408541" z3="-4.55511162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53187909" y3="1.21187743" z3="-4.34308341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.44578119" y3="2.88797301" z3="-5.10552039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92536529" y3="-0.51811038" z3="-3.44404566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10089272" y3="-0.02884356" z3="-0.99611109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4130557" y3="-1.16263651" z3="-2.01320308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94077816" y3="-1.0476745" z3="-1.83277699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12550608" y3="-2.48369942" z3="-1.88151285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13055099" y3="-3.5874692" z3="0.64688971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02960739" y3="-5.32023774" z3="-4.74130728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25411109" y3="-5.04248648" z3="-3.707967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84043564" y3="-4.29991514" z3="-1.09958621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77802735" y3="-4.64726701" z3="-2.85903339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57273297" y3="-5.09389599" z3="-3.25169599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8665952" y3="-4.7165823" z3="-1.94378994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49671212" y3="-4.2916108" z3="-1.53851787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81352231" y3="-4.59750058" z3="-3.20387579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37800533" y3="-5.39834634" z3="-3.92395948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90481111" y3="-4.72356457" z3="-1.60327578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02253544" y3="-3.8292543" z3="0.21465454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15907638" y3="-3.60668922" z3="0.86291845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0500997" y3="-4.06880589" z3="0.43532535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14983776" y3="-3.46096587" z3="2.32895602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20275692" y3="-3.25637794" z3="5.1257444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34808891" y3="-3.64312565" z3="3.03483525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97771551" y3="-3.18339868" z3="3.04784976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00163202" y3="-3.08221912" z3="4.43595267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37398181" y3="-3.54244474" z3="4.42294261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26705151" y3="-3.87291236" z3="2.48888254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01678295" y3="-3.06933792" z3="2.54153353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06926604" y3="-2.88877135" z3="4.97384138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31407474" y3="-3.6950631" z3="4.95981269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22079676" y3="-3.18486967" z3="6.21683867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42648453" y3="-3.93964138" z3="-0.63840208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19057164" y3="-3.45244681" z3="-1.09708641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50459051" y3="0.20131892" z3="-4.70125568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06635316" y3="-1.68116026" z3="-0.00092807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.86886685" y3="-0.91900918" z3="1.14959045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.79592418" y3="-0.27744395" z3="1.46077292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.31770963" y3="0.59064418" z3="1.16806406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.36129871" y3="1.44747417" z3="-0.48215027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0240598" y3="-0.66625648" z3="1.40697918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32956845" y3="1.82551873" z3="2.57676548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8325097" y3="-0.88737235" z3="2.05927504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.57987008" y3="-0.26360105" z3="3.30849966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1497024" y3="0.72515054" z3="-1.29093492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.44418215" y3="2.20682978" z3="-0.49905738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.3220117" y3="1.96125374" z3="-0.65634264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02200084" y3="-1.01880368" z3="2.45196543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.00538667" y3="-0.21287509" z3="1.18874531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.91187591" y3="-1.51500967" z3="0.71284981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40746186" y3="1.3173401" z3="3.5541089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60859811" y3="2.40986135" z3="2.57533556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16752281" y3="2.53950396" z3="2.48709822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.71825079" y3="-0.72766487" z3="3.81523082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49026568" y3="-0.41784529" z3="3.90317572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.39452053" y3="0.81523742" z3="3.17531879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85692531" y3="-0.76265715" z3="0.99185738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40790777" y3="-2.08048147" z3="0.84296307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75590553" y3="-2.72786073" z3="1.88487452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57133256" y3="-2.04531781" z3="3.08289732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.07721922" y3="-0.76597874" z3="3.28899122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72782267" y3="-0.13147376" z3="2.23556926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49504158" y3="-2.56908503" z3="-0.12844523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34064252" y3="-3.72755041" z3="1.75357951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71071471" y3="-2.64216065" z3="4.10915752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.91561138" y3="-0.26528573" z3="4.24337256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.09007064" y3="0.89241417" z3="2.35968083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82010076" y3="0.41558202" z3="-4.29882807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79295082" y3="-0.5554604" z3="-4.49902212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42963784" y3="-1.74398153" z3="-5.12053801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13526661" y3="-1.96893519" z3="-5.5774223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82996907" y3="-0.99397691" z3="-5.35735119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07779833" y3="1.33571595" z3="-3.76968193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82058963" y3="-0.41727384" z3="-4.15433892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43477186" y3="-2.79703415" z3="-5.2778222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10676044" y3="-2.90689957" z3="-6.07707327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85822722" y3="-1.17366201" z3="-5.67879081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.40822978" y3="-1.95582862" z3="5.06554985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30844482" y3="-3.77264513" z3="3.92892922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19425519" y3="-3.69796223" z3="-6.0524386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4486454" y3="-2.71656169" z3="-4.61266601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0520744" y3="1.1698028" z3="-1.47362151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08231842" y3="1.55654532" z3="-2.44406122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41404267" y3="1.52958966" z3="-1.66778233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.80876928" y3="2.22416637" z3="-2.78509491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14755578" y3="1.23224809" z3="-0.91193014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.86018117" y3="2.49074529" z3="-2.92620592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52686231" y3="2.25725273" z3="-3.59983045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.85231479" y3="2.58184268" z3="-3.7654654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79866617" y3="2.52955286" z3="-4.36740472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.17187968" y3="3.1149649" z3="-4.66556232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.34373526" y3="3.12150542" z3="-3.26238819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.21949216" y3="3.53118503" z3="-4.03792105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.13164494" y3="4.13330586" z3="-2.64279049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.8507509" y3="5.46767894" z3="-2.82769347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.96607535" y3="3.84536814" z3="-2.00164528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.47147088" y3="6.22450425" z3="-2.3378508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.96449541" y3="4.91879805" z3="-4.22470409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.76451737" y3="5.87063732" z3="-3.64015727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.10487752" y3="5.21609438" z3="-4.83354271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.55504405" y3="6.93607063" z3="-3.78536682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47288859" y3="-2.1483473" z3="-0.29797145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46053224" y3="-2.95380455" z3="-1.05216688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99701135" y3="-2.51009069" z3="0.60116236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0825855" y3="-1.3285001" z3="-0.72310292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17341065" y3="-1.40501071" z3="-1.18393044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30356814" y3="-0.36579466" z3="-1.53876147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09633166" y3="-1.53952658" z3="-0.98908022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43056367" y3="-2.06425339" z3="-2.0265192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.344,.006,-.188;7.3885,.1557,.4204;6.643,.424,-.3346;4.7063,1.2096,-2.2392;4.3838,.3845,-1.1747;2.7074,.8128,-3.6402;3.5993,1.719,-3.0977;1.3308,2.5541,-4.5551;1.5319,1.2119,-4.3431;.4458,2.888,-5.1055;2.9254,-.5181,-3.444;3.1009,-.0288,-.9961;2.4131,-1.1626,-2.0132;.9408,-1.0477,-1.8328;3.1255,-2.4837,-1.8815;-.1306,-3.5875,.6469;-.0296,-5.3202,-4.7413;-.2541,-5.0425,-3.708;-.8404,-4.2999,-1.0996;.778,-4.6473,-2.859;-1.5727,-5.0939,-3.2517;-1.8666,-4.7166,-1.9438;.4967,-4.2916,-1.5385;1.8135,-4.5975,-3.2039;-2.378,-5.3983,-3.924;-2.9048,-4.7236,-1.6033;-1.0225,-3.8293,.2147;-2.1591,-3.6067,.8629;-3.0501,-4.0688,.4353;-2.1498,-3.461,2.329;-2.2028,-3.2564,5.1257;-3.3481,-3.6431,3.0348;-.9777,-3.1834,3.0478;-1.0016,-3.0822,4.436;-3.374,-3.5424,4.4229;-4.2671,-3.8729,2.4889;-.0168,-3.0693,2.5415;-.0693,-2.8888,4.9738;-4.3141,-3.6951,4.9598;-2.2208,-3.1849,6.2168;1.4265,-3.9396,-.6384;2.1906,-3.4524,-1.0971;.5046,.2013,-4.7013;-3.0664,-1.6812,-.0009;-2.8689,-.919,1.1496;-1.7959,-.2774,1.4608;-.3177,.5906,1.1681;-.3613,1.4475,-.4822;1.0241,-.6663,1.407;-.3296,1.8255,2.5768;-3.8325,-.8874,2.0593;-3.5799,-.2636,3.3085;-.1497,.7252,-1.2909;.4442,2.2068,-.4991;-1.322,1.9613,-.6563;1.022,-1.0188,2.452;2.0054,-.2129,1.1887;.9119,-1.515,.7128;-.4075,1.3173,3.5541;.6086,2.4099,2.5753;-1.1675,2.5395,2.4871;-2.7183,-.7277,3.8152;-4.4903,-.4178,3.9032;-3.3945,.8152,3.1753;4.8569,-.7627,.9919;4.4079,-2.0805,.843;3.7559,-2.7279,1.8849;3.5713,-2.0453,3.0829;4.0772,-.766,3.289;4.7278,-.1315,2.2356;4.495,-2.5691,-.1284;3.3406,-3.7276,1.7536;2.7107,-2.6422,4.1092;3.9156,-.2653,4.2434;5.0901,.8924,2.3597;-.8201,.4156,-4.2988;-1.793,-.5555,-4.499;-1.4296,-1.744,-5.1205;-.1353,-1.9689,-5.5774;.83,-.994,-5.3574;-1.0778,1.3357,-3.7697;-2.8206,-.4173,-4.1543;-2.4348,-2.797,-5.2778;.1068,-2.9069,-6.0771;1.8582,-1.1737,-5.6788;2.4082,-1.9558,5.0655;2.3084,-3.7726,3.9289;-2.1943,-3.698,-6.0524;-3.4486,-2.7166,-4.6127;7.0521,1.1698,-1.4736;6.0823,1.5565,-2.4441;8.414,1.5296,-1.6678;8.8088,2.2242,-2.7851;9.1476,1.2322,-.9119;9.8602,2.4907,-2.9262;6.5269,2.2573,-3.5998;7.8523,2.5818,-3.7655;5.7987,2.5296,-4.3674;8.1719,3.115,-4.6656;3.3437,3.1215,-3.2624;2.2195,3.5312,-4.0379;4.1316,4.1333,-2.6428;3.8508,5.4677,-2.8277;4.9661,3.8454,-2.0016;4.4715,6.2245,-2.3379;1.9645,4.9188,-4.2247;2.7645,5.8706,-3.6402;1.1049,5.2161,-4.8335;2.555,6.9361,-3.7854;-4.4729,-2.1483,-.298;-4.4605,-2.9538,-1.0522;-4.997,-2.5101,.6012;-5.0826,-1.3285,-.7231;-2.1734,-1.405,-1.1839;-2.3036,-.3658,-1.5388;-1.0963,-1.5395,-.9891;-2.4306,-2.0643,-2.0265;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650327252308</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004260842270 0.000553776856 0.016910495373 0.005332462299</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030325204 -0.001734818 0.000175055 0.000196226 0.000238057 0.000351994 0.000356721 0.000390070 0.000533748 0.000639965 0.000774111 0.000864390 0.000897828 0.001024070 0.001127387 0.001178162 0.001251431 0.001411670 0.001522709 0.001652407 0.001762386 0.001832160 0.002148651 0.002212253 0.002271798 0.002524950 0.002882612 0.003110300 0.003215746 0.003400054 0.003457415 0.003947572 0.004204649 0.004543055 0.005332415 0.005363285 0.005542571 0.005968833 0.006481894 0.006767167 0.007389853 0.007591843 0.007997091 0.008553350 0.008889691 0.009142010 0.009565467 0.009884573 0.010884725 0.011057181 0.012103759 0.012322880 0.012886664 0.013335573 0.014071510 0.014633952 0.015019097 0.015241233 0.015333030 0.015541977 0.016174310 0.016854816 0.018029033 0.018411833 0.018806782 0.019704041 0.019975784 0.020972187 0.021330005 0.022045879 0.022822346 0.024288923 0.024909785 0.025900525 0.026386267 0.027127528 0.028769206 0.028799098 0.030967259 0.031502611 0.032279898 0.033493876 0.034066419 0.035264419 0.037544034 0.038333006 0.039222765 0.039764603 0.040818019 0.043403598 0.043971227 0.044251466 0.045462269 0.048480878 0.049202563 0.049647424 0.050221811 0.051007982 0.052133036 0.052339494 0.052399777 0.052637722 0.053568234 0.054096831 0.054712334 0.055138561 0.055896832 0.056366797 0.056484793 0.057161601 0.057812198 0.058683917 0.059511727 0.060700917 0.061171238 0.062003198 0.062100719 0.062415046 0.064922911 0.065747473 0.065973915 0.066496062 0.067557202 0.071949049 0.073827105 0.074861908 0.076957669 0.080714638 0.083731742 0.085110240 0.085909497 0.086381472 0.087520115 0.089829471 0.090844276 0.093895390 0.094514473 0.095593351 0.095860928 0.097398293 0.097619938 0.098636617 0.099274780 0.099910785 0.100259807 0.101289528 0.101525225 0.102593482 0.103115405 0.103787026 0.104577183 0.106510112 0.107097512 0.107367288 0.109091304 0.109721422 0.110874612 0.112355577 0.113208480 0.114067503 0.117359025 0.118661467 0.119531239 0.121274115 0.123858558 0.125096844 0.126024167 0.130687673 0.133837075 0.134820847 0.141756826 0.142424207 0.145151405 0.146132824 0.147915280 0.150000473 0.150664277 0.152659449 0.154728244 0.158803485 0.160370848 0.172203075 0.173002760 0.175784922 0.182808999 0.183505846 0.188124145 0.188622123 0.191479281 0.193321407 0.196670636 0.197989669 0.202569107 0.205127731 0.206753498 0.209630079 0.209887766 0.212978433 0.213773744 0.216553886 0.218413617 0.224359605 0.225031888 0.229791313 0.233745582 0.234437773 0.234992871 0.243691503 0.254542713 0.256596751 0.260820192 0.265649290 0.278424771 0.282269390 0.286072043 0.288645921 0.292722516 0.300316965 0.304532152 0.305065734 0.306253988 0.313884327 0.314728145 0.321696858 0.324447897 0.329292625 0.346074687 0.348333716 0.350902860 0.354410518 0.354658406 0.360947956 0.361718089 0.377203139 0.378411293 0.389524299 0.408987072 0.422163761 0.426112317 0.450494720 0.466431153 0.468645038 0.475625873 0.480523662 0.480985283 0.487423188 0.502777429 0.508623033 0.533416298 0.564635492 0.567272978 0.585480301 0.592182436 0.599054891 0.603356053 0.637328581 0.641586175 0.644385147 0.669308710 0.672607726 0.683755404 0.686263598 0.691243632 0.698149395 0.703829745 0.714363737 0.730007665 0.738763754 0.749943916 0.759427613 0.771868544 0.776704555 0.805821784 0.809564178 0.812848000 0.815726009 0.820086943 0.822130107 0.829500234 0.830873930 0.831690852 0.841163374 0.844910246 0.846030973 0.855202848 0.857585163 0.863751847 0.864638670 0.870937148 0.874847686 0.883348585 0.887479705 0.891641285 0.895947808 0.918028337 0.922259722 0.930586144 0.932538449 0.963850977 0.975294415 0.983952100 0.999336641 1.011211784 1.024364219 1.040019433 1.047653146 1.054491670 1.060616939 1.085396756 1.086368716 1.096929250 1.104803328 1.111544913 1.112345147 1.122773935 1.123649500 1.135015774 1.139074255 1.170551998 1.172614290 1.179442007 1.185657435 1.194072452 1.214001759 1.220244885 1.265445029 1.295886699 1.313655882 1.324802786 1.325862178 1.328198824 1.329562788 1.333811121 1.341579908 1.344443663 1.355551028 1.374885358 1.380581141 1.380969723 1.388518291 1.418528767 1.420440238 1.551041708 1.660045094 1.772318944</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">81</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34461475" y3="0.00232163" z3="-0.18769547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38870701" y3="0.15150091" z3="0.41925296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64288473" y3="0.42128067" z3="-0.33456855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70485886" y3="1.20796897" z3="-2.23692281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38396303" y3="0.38113893" z3="-1.17350846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70569955" y3="0.80931477" z3="-3.63712313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59582903" y3="1.71693919" z3="-3.09312332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.32237453" y3="2.55247684" z3="-4.54360531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52859344" y3="1.20836411" z3="-4.33729905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.43691024" y3="2.88407498" z3="-5.09481839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92624513" y3="-0.52173517" z3="-3.44314383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10179589" y3="-0.0339853" z3="-0.99514775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41511712" y3="-1.16774298" z3="-2.01248921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94278655" y3="-1.05441618" z3="-1.83103266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12847882" y3="-2.48816011" z3="-1.88153279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1291705" y3="-3.58479843" z3="0.64421097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03032171" y3="-5.32384152" z3="-4.74194362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25423008" y3="-5.0449912" z3="-3.70876394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83986262" y3="-4.2982942" z3="-1.10126832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7780307" y3="-4.6506564" z3="-2.85992058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57253487" y3="-5.09380573" z3="-3.25259028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86612406" y3="-4.71416007" z3="-1.94526895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49736236" y3="-4.29380424" z3="-1.53965729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81340614" y3="-4.60323867" z3="-3.20468864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37744477" y3="-5.39858101" z3="-3.92450794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90415611" y3="-4.71875571" z3="-1.60509872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02150962" y3="-3.82582796" z3="0.2123832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15749855" y3="-3.60263054" z3="0.86101716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04917561" y3="-4.06354098" z3="0.43338007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14789011" y3="-3.45622732" z3="2.32691095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19991187" y3="-3.25077458" z3="5.12356659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34675092" y3="-3.63629059" z3="3.03305402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97467386" y3="-3.18026689" z3="3.04549074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99810594" y3="-3.07870098" z3="4.43354268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37205443" y3="-3.53529758" z3="4.42116023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26655652" y3="-3.86480593" z3="2.48745425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01308728" y3="-3.0679438" z3="2.5391273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06494191" y3="-2.88661831" z3="4.97117868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31278399" y3="-3.68605914" z3="4.95825698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21749007" y3="-3.17906905" z3="6.2146418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42758813" y3="-3.94390471" z3="-0.63918965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19150875" y3="-3.45735047" z3="-1.09720808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5031423" y3="0.19635634" z3="-4.69844811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06460852" y3="-1.67513761" z3="-0.0031569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.86453471" y3="-0.912809" z3="1.14655241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.79129315" y3="-0.2708322" z3="1.45520163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.31198228" y3="0.59589699" z3="1.16182991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.35192672" y3="1.44496988" z3="-0.49251822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.02812073" y3="-0.66283193" z3="1.40870864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3273745" y3="1.83671571" z3="2.56593669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.82602061" y3="-0.881694" z3="2.05821514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.57253163" y3="-0.25799901" z3="3.30637083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.14147437" y3="0.72214497" z3="-1.29853596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.45422769" y3="2.20226326" z3="-0.51162836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.31148497" y3="1.96614447" z3="-0.66803044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02133499" y3="-1.01401188" z3="2.454528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.01234357" y3="-0.21245776" z3="1.19321935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.91558498" y3="-1.51309838" z3="0.71588721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40364769" y3="1.33230169" z3="3.54519933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60803532" y3="2.42478421" z3="2.56298921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16775984" y3="2.5470223" z3="2.47363503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.70999745" y3="-0.71950874" z3="3.81240014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.48083545" y3="-0.41435755" z3="3.90247339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.39037853" y3="0.82021097" z3="3.17181215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85804491" y3="-0.76737643" z3="0.99175301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40642009" y3="-2.0848958" z3="0.84149545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75467088" y3="-2.73198553" z3="1.88387441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57313983" y3="-2.04984932" z3="3.08374195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.08203815" y3="-0.77125713" z3="3.29122587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.73239131" y3="-0.13706553" z3="2.23734214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49031727" y3="-2.57267858" z3="-0.1319053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33824174" y3="-3.73144112" z3="1.75231158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71211409" y3="-2.64556609" z3="4.11031241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.92302966" y3="-0.27110283" z3="4.24742059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.09580044" y3="0.88663218" z3="2.36192673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82416325" y3="0.40723788" z3="-4.29891988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79641158" y3="-0.56323475" z3="-4.50225704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43086828" y3="-1.75079912" z3="-5.12568697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13317306" y3="-1.97249133" z3="-5.57800375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83102294" y3="-0.99785772" z3="-5.35573546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08523228" y3="1.32647548" z3="-3.76638437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8204183" y3="-0.41971755" z3="-4.16374869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43471917" y3="-2.80486134" z3="-5.2879999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11183441" y3="-2.90997397" z3="-6.07798906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85871433" y3="-1.17845264" z3="-5.67220834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41138709" y3="-1.95884945" z3="5.06735069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30794474" y3="-3.7754102" z3="3.92988556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19054542" y3="-3.70602979" z3="-6.06168139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45114767" y3="-2.72363705" z3="-4.62737424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05038383" y3="1.16957467" z3="-1.47260552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07987856" y3="1.55706126" z3="-2.44191312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41140148" y3="1.53067693" z3="-1.6671922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.80430124" y3="2.22638236" z3="-2.78401201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14579808" y3="1.23376703" z3="-0.91206013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8549991" y3="2.49346819" z3="-2.92559875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52245458" y3="2.26008397" z3="-3.59679207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.84697143" y3="2.58471461" z3="-3.76321815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79341241" y3="2.53314472" z3="-4.36326574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.16511867" y3="3.11873522" z3="-4.66284378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.33425165" y3="3.12136598" z3="-3.25025238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.20773451" y3="3.53193969" z3="-4.02214565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.12178151" y3="4.13186544" z3="-2.630232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.84099469" y3="5.46373663" z3="-2.81468381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.95989138" y3="3.84180603" z3="-1.99425755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.46209084" y3="6.21887643" z3="-2.32556338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.95199487" y3="4.91771345" z3="-4.2077936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.75277215" y3="5.8669754" z3="-3.62464936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.09306083" y3="5.21314403" z3="-4.81808411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.54578462" y3="6.92906794" z3="-3.77168231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47162851" y3="-2.14218219" z3="-0.29717239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46062223" y3="-2.94856589" z3="-1.05001587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99437837" y3="-2.50238104" z3="0.6032102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08167914" y3="-1.32282534" z3="-0.72276062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1739591" y3="-1.40135776" z3="-1.18873601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30396906" y3="-0.36249732" z3="-1.5444849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09586297" y3="-1.5369764" z3="-0.99704773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43416512" y3="-2.06163782" z3="-2.0300852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3446,.0023,-.1877;7.3887,.1515,.4193;6.6429,.4213,-.3346;4.7049,1.208,-2.2369;4.384,.3811,-1.1735;2.7057,.8093,-3.6371;3.5958,1.7169,-3.0931;1.3224,2.5525,-4.5436;1.5286,1.2084,-4.3373;.4369,2.8841,-5.0948;2.9262,-.5217,-3.4431;3.1018,-.034,-.9951;2.4151,-1.1677,-2.0125;.9428,-1.0544,-1.831;3.1285,-2.4882,-1.8815;-.1292,-3.5848,.6442;-.0303,-5.3238,-4.7419;-.2542,-5.045,-3.7088;-.8399,-4.2983,-1.1013;.778,-4.6507,-2.8599;-1.5725,-5.0938,-3.2526;-1.8661,-4.7142,-1.9453;.4974,-4.2938,-1.5397;1.8134,-4.6032,-3.2047;-2.3774,-5.3986,-3.9245;-2.9042,-4.7188,-1.6051;-1.0215,-3.8258,.2124;-2.1575,-3.6026,.861;-3.0492,-4.0635,.4334;-2.1479,-3.4562,2.3269;-2.1999,-3.2508,5.1236;-3.3468,-3.6363,3.0331;-.9747,-3.1803,3.0455;-.9981,-3.0787,4.4335;-3.3721,-3.5353,4.4212;-4.2666,-3.8648,2.4875;-.0131,-3.0679,2.5391;-.0649,-2.8866,4.9712;-4.3128,-3.6861,4.9583;-2.2175,-3.1791,6.2146;1.4276,-3.9439,-.6392;2.1915,-3.4574,-1.0972;.5031,.1964,-4.6984;-3.0646,-1.6751,-.0032;-2.8645,-.9128,1.1466;-1.7913,-.2708,1.4552;-.312,.5959,1.1618;-.3519,1.445,-.4925;1.0281,-.6628,1.4087;-.3274,1.8367,2.5659;-3.826,-.8817,2.0582;-3.5725,-.258,3.3064;-.1415,.7221,-1.2985;.4542,2.2023,-.5116;-1.3115,1.9661,-.668;1.0213,-1.014,2.4545;2.0123,-.2125,1.1932;.9156,-1.5131,.7159;-.4036,1.3323,3.5452;.608,2.4248,2.563;-1.1678,2.547,2.4736;-2.71,-.7195,3.8124;-4.4808,-.4144,3.9025;-3.3904,.8202,3.1718;4.858,-.7674,.9918;4.4064,-2.0849,.8415;3.7547,-2.732,1.8839;3.5731,-2.0498,3.0837;4.082,-.7713,3.2912;4.7324,-.1371,2.2373;4.4903,-2.5727,-.1319;3.3382,-3.7314,1.7523;2.7121,-2.6456,4.1103;3.923,-.2711,4.2474;5.0958,.8866,2.3619;-.8242,.4072,-4.2989;-1.7964,-.5632,-4.5023;-1.4309,-1.7508,-5.1257;-.1332,-1.9725,-5.578;.831,-.9979,-5.3557;-1.0852,1.3265,-3.7664;-2.8204,-.4197,-4.1637;-2.4347,-2.8049,-5.288;.1118,-2.91,-6.078;1.8587,-1.1785,-5.6722;2.4114,-1.9588,5.0674;2.3079,-3.7754,3.9299;-2.1905,-3.706,-6.0617;-3.4511,-2.7236,-4.6274;7.0504,1.1696,-1.4726;6.0799,1.5571,-2.4419;8.4114,1.5307,-1.6672;8.8043,2.2264,-2.784;9.1458,1.2338,-.9121;9.855,2.4935,-2.9256;6.5225,2.2601,-3.5968;7.847,2.5847,-3.7632;5.7934,2.5331,-4.3633;8.1651,3.1187,-4.6628;3.3343,3.1214,-3.2503;2.2077,3.5319,-4.0221;4.1218,4.1319,-2.6302;3.841,5.4637,-2.8147;4.9599,3.8418,-1.9943;4.4621,6.2189,-2.3256;1.952,4.9177,-4.2078;2.7528,5.867,-3.6246;1.0931,5.2131,-4.8181;2.5458,6.9291,-3.7717;-4.4716,-2.1422,-.2972;-4.4606,-2.9486,-1.05;-4.9944,-2.5024,.6032;-5.0817,-1.3228,-.7228;-2.174,-1.4014,-1.1887;-2.304,-.3625,-1.5445;-1.0959,-1.537,-.997;-2.4342,-2.0616,-2.0301;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650320040419</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003535515740 0.000470897789 0.022363686667 0.005341082334</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030331542 -0.001567704 0.000175358 0.000200567 0.000241618 0.000352062 0.000358512 0.000390068 0.000535696 0.000665117 0.000778138 0.000869260 0.000900015 0.001028984 0.001136945 0.001181395 0.001258013 0.001411248 0.001541526 0.001658857 0.001769327 0.001855207 0.002151617 0.002240407 0.002273722 0.002528615 0.002882633 0.003132639 0.003239065 0.003409781 0.003494194 0.003966497 0.004205345 0.004556178 0.005333760 0.005390048 0.005553899 0.005968455 0.006487914 0.006775553 0.007395363 0.007638176 0.008068903 0.008585916 0.008912576 0.009143055 0.009567945 0.009888077 0.010894643 0.011066504 0.012105023 0.012323628 0.012908988 0.013338947 0.014087797 0.014638872 0.015021022 0.015264404 0.015344272 0.015541995 0.016174357 0.016854792 0.018046086 0.018441369 0.018811602 0.019704015 0.019975985 0.020972249 0.021330727 0.022049543 0.022822935 0.024287997 0.024908705 0.025900273 0.026388016 0.027179812 0.028796205 0.028836157 0.030994389 0.031504807 0.032278995 0.033496793 0.034112946 0.035323510 0.037545835 0.038364365 0.039229633 0.039774454 0.040817796 0.043412728 0.044008739 0.044338557 0.045505005 0.048481027 0.049202674 0.049648891 0.050222056 0.051007930 0.052135785 0.052340996 0.052399737 0.052638178 0.053568627 0.054097096 0.054727705 0.055140028 0.055903124 0.056368427 0.056484784 0.057169277 0.058100721 0.058911560 0.059527977 0.060701060 0.061171359 0.062006688 0.062123362 0.062414613 0.064922967 0.065747727 0.065978212 0.066543335 0.067558932 0.071951033 0.073827131 0.074869942 0.076962137 0.080736457 0.083733792 0.085112516 0.085945532 0.086381556 0.087525058 0.089848813 0.090844052 0.093912254 0.094515103 0.095608650 0.095861849 0.097399054 0.097640283 0.098801422 0.099275493 0.099916177 0.100257969 0.101297497 0.101535608 0.102654652 0.103118356 0.103788219 0.104600683 0.106514205 0.107162849 0.107379332 0.109118296 0.109734558 0.110972044 0.112359445 0.113209905 0.114070506 0.117359009 0.118669404 0.119541652 0.121274006 0.123882656 0.125097420 0.126026532 0.130687171 0.133854491 0.134828791 0.141756799 0.142427027 0.145151776 0.146149961 0.147910964 0.149998648 0.150674737 0.152687275 0.154870990 0.158804171 0.160374205 0.172212556 0.173006929 0.175788215 0.182810037 0.183505379 0.188124223 0.188659805 0.191483802 0.193321381 0.196685902 0.197997515 0.202570014 0.205148698 0.206753498 0.209630170 0.209908640 0.212984801 0.213917395 0.216557150 0.218426142 0.224366498 0.225036748 0.229809021 0.233747414 0.234457439 0.234996626 0.243691360 0.254559214 0.256598092 0.260847928 0.265669085 0.278426014 0.282269320 0.286072972 0.288646287 0.292750396 0.300453830 0.304540121 0.305065934 0.306259818 0.313923145 0.314728164 0.321699288 0.325190203 0.329301029 0.346140709 0.348338564 0.350902763 0.354511770 0.354659873 0.360949541 0.361739625 0.377210923 0.378449229 0.389550047 0.408991479 0.422335404 0.426197808 0.450494850 0.466457631 0.468644978 0.475628681 0.480531078 0.480990051 0.487432634 0.502823852 0.508679155 0.533418737 0.564650078 0.567278180 0.585484732 0.592182487 0.599061344 0.603387164 0.637362262 0.641592728 0.644391547 0.669425171 0.672611650 0.683755869 0.686298825 0.691244618 0.698153302 0.703845359 0.714443767 0.731255343 0.738773242 0.749947743 0.759429453 0.771868573 0.776707611 0.805853748 0.809565423 0.812851990 0.815928275 0.820087378 0.822139714 0.829525731 0.830876569 0.831700410 0.841190822 0.844911155 0.846031496 0.855574560 0.857585907 0.863761080 0.864640815 0.870947100 0.875039991 0.883351234 0.887479941 0.891642496 0.895957105 0.918039071 0.922261291 0.930613217 0.932577761 0.963852563 0.975311760 0.983952029 0.999380108 1.011295493 1.024371756 1.040024805 1.047663386 1.054626845 1.060720869 1.085404214 1.086369568 1.097004904 1.104808231 1.111588771 1.112356624 1.122773956 1.123661366 1.135015820 1.139079667 1.170552090 1.173180093 1.179671399 1.185659004 1.194072443 1.214034220 1.220248416 1.265455346 1.296011862 1.313706851 1.325028862 1.325861645 1.328218147 1.329592478 1.333813836 1.341588205 1.344467904 1.355551081 1.374918099 1.380650156 1.380969699 1.388758025 1.418532157 1.420446976 1.551044429 1.660046460 1.772344327</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">82</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34539334" y3="-0.00203525" z3="-0.18630724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39024415" y3="0.15152604" z3="0.42011929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64314052" y3="0.41982772" z3="-0.33332105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70212097" y3="1.20513" z3="-2.23373919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38328829" y3="0.37590205" z3="-1.17130113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70191746" y3="0.80709707" z3="-3.63258433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59176903" y3="1.71437486" z3="-3.08804112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3176525" y3="2.54789487" z3="-4.53723199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52406471" y3="1.20493426" z3="-4.33248295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.43125988" y3="2.8808036" z3="-5.08596527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92437015" y3="-0.52400119" z3="-3.44149289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10180243" y3="-0.04162079" z3="-0.99248801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41585428" y3="-1.17441604" z3="-2.01183876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94348612" y3="-1.06346632" z3="-1.82872965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13133836" y3="-2.49423312" z3="-1.88471665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12804817" y3="-3.57812663" z3="0.64098597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02946059" y3="-5.33457737" z3="-4.74052639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25360787" y3="-5.05173066" z3="-3.70827883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83915332" y3="-4.29497488" z3="-1.1030616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7803184" y3="-4.66034626" z3="-2.85936928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5739464" y3="-5.09193902" z3="-3.25330445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8672795" y3="-4.70766273" z3="-1.94708077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.499136" y3="-4.29772618" z3="-1.54041594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81719137" y3="-4.61967194" z3="-3.2035464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.38089367" y3="-5.39368206" z3="-3.92519928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90664285" y3="-4.70537527" z3="-1.60786339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02041783" y3="-3.81902526" z3="0.20941655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15655228" y3="-3.59630572" z3="0.85805133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04724487" y3="-4.05905245" z3="0.43130818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14664344" y3="-3.45035655" z3="2.3240835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19812343" y3="-3.24824509" z3="5.12102227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34436343" y3="-3.63320369" z3="3.03021438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97437755" y3="-3.17296821" z3="3.04277016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99758771" y3="-3.07301961" z3="4.43098521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36954076" y3="-3.53374913" z3="4.41841636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26338862" y3="-3.86288964" z3="2.48447112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01402579" y3="-3.05765661" z3="2.53627887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06524092" y3="-2.87986099" z3="4.9689122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30919422" y3="-3.6871529" z3="4.95537559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21546369" y3="-3.17779075" z3="6.21218741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43006721" y3="-3.94889329" z3="-0.64028157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19540601" y3="-3.46451414" z3="-1.09932524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5001537" y3="0.19174829" z3="-4.69743024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06515076" y3="-1.67187108" z3="-0.00663038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.86108756" y3="-0.90893244" z3="1.14238664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.78292252" y3="-0.27157305" z3="1.44785529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.30722767" y3="0.59832222" z3="1.1562068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.34601019" y3="1.44491356" z3="-0.49931888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0335945" y3="-0.6560758" z3="1.41067439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32623914" y3="1.84464754" z3="2.555288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.82137197" y3="-0.872799" z3="2.05603651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.55977903" y3="-0.25158803" z3="3.30559959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.13291427" y3="0.72157636" z3="-1.30366005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.45737623" y3="2.20344001" z3="-0.51710851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.3052578" y3="1.95791544" z3="-0.6786663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02514638" y3="-1.0027595" z3="2.45746338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.01519143" y3="-0.20371491" z3="1.19554531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.92554797" y3="-1.50832772" z3="0.72048623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40601822" y3="1.3450127" z3="3.53738811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61117474" y3="2.43135361" z3="2.55072536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16548897" y3="2.55723597" z3="2.45702439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.69706777" y3="-0.72101849" z3="3.80725473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.46852172" y3="-0.40226247" z3="3.90468158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.37003986" y3="0.826992" z3="3.17348732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86012137" y3="-0.77202243" z3="0.99331678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4056423" y3="-2.08848473" z3="0.84222883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75311063" y3="-2.73514477" z3="1.88428001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57373617" y3="-2.05347927" z3="3.08453239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0860443" y3="-0.77627617" z3="3.29303693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.73686212" y3="-0.14241713" z3="2.23927293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48897059" y3="-2.57600406" z3="-0.13071718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33346253" y3="-3.73354362" z3="1.75125169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71235868" y3="-2.64832711" z3="4.11128722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.9289226" y3="-0.2764426" z3="4.24949198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.1034593" y3="0.88044052" z3="2.36517976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82696674" y3="0.4032222" z3="-4.30141414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79766203" y3="-0.56702006" z3="-4.5066903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42978605" y3="-1.75401975" z3="-5.12841708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13286529" y3="-1.9764721" z3="-5.57909214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83019569" y3="-1.00185515" z3="-5.35440832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08796196" y3="1.32187015" z3="-3.77193611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82784053" y3="-0.4313093" z3="-4.16783206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43346875" y3="-2.80743065" z3="-5.29393755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11295362" y3="-2.91320485" z3="-6.07920789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85983429" y3="-1.180093" z3="-5.66992786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41222877" y3="-1.96120137" z3="5.06820336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3072843" y3="-3.777779" z3="3.93113129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18682097" y3="-3.70954611" z3="-6.0655008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45276147" y3="-2.72531116" z3="-4.6379412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04866724" y3="1.16884995" z3="-1.47125657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07673468" y3="1.55601158" z3="-2.4394288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.40925745" y3="1.5319345" z3="-1.66629201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.80077582" y3="2.23040963" z3="-2.78226286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14432919" y3="1.23428878" z3="-0.91215783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.85126691" y3="2.49952262" z3="-2.92409092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51780863" y3="2.26079972" z3="-3.59373602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.84225395" y3="2.58898561" z3="-3.76022489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.78791898" y3="2.53376066" z3="-4.35946141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.15928206" y3="3.12525671" z3="-4.65924009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.33103028" y3="3.11658579" z3="-3.24596886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.20321374" y3="3.52608979" z3="-4.01641123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.11760038" y3="4.12770162" z3="-2.62454255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.83188149" y3="5.4612176" z3="-2.8029765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.95568499" y3="3.83922196" z3="-1.98832542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.45186253" y3="6.21708896" z3="-2.31229123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.94280202" y3="4.91341461" z3="-4.19605882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.74141462" y3="5.86436066" z3="-3.60988772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.08071751" y3="5.21043114" z3="-4.80160956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.52776605" y3="6.92936053" z3="-3.74931862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47338369" y3="-2.13745335" z3="-0.29732086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46529038" y3="-2.94600694" z3="-1.04854965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.995235" y3="-2.49469924" z3="0.6050336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08276294" y3="-1.31788226" z3="-0.72350525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17646031" y3="-1.39874646" z3="-1.19351138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30664058" y3="-0.35976501" z3="-1.5492122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09866703" y3="-1.53458484" z3="-1.00298935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43793056" y3="-2.05909228" z3="-2.03402708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3454,-.002,-.1863;7.3902,.1515,.4201;6.6431,.4198,-.3333;4.7021,1.2051,-2.2337;4.3833,.3759,-1.1713;2.7019,.8071,-3.6326;3.5918,1.7144,-3.088;1.3177,2.5479,-4.5372;1.5241,1.2049,-4.3325;.4313,2.8808,-5.086;2.9244,-.524,-3.4415;3.1018,-.0416,-.9925;2.4159,-1.1744,-2.0118;.9435,-1.0635,-1.8287;3.1313,-2.4942,-1.8847;-.128,-3.5781,.641;-.0295,-5.3346,-4.7405;-.2536,-5.0517,-3.7083;-.8392,-4.295,-1.1031;.7803,-4.6603,-2.8594;-1.5739,-5.0919,-3.2533;-1.8673,-4.7077,-1.9471;.4991,-4.2977,-1.5404;1.8172,-4.6197,-3.2035;-2.3809,-5.3937,-3.9252;-2.9066,-4.7054,-1.6079;-1.0204,-3.819,.2094;-2.1566,-3.5963,.8581;-3.0472,-4.0591,.4313;-2.1466,-3.4504,2.3241;-2.1981,-3.2482,5.121;-3.3444,-3.6332,3.0302;-.9744,-3.173,3.0428;-.9976,-3.073,4.431;-3.3695,-3.5337,4.4184;-4.2634,-3.8629,2.4845;-.014,-3.0577,2.5363;-.0652,-2.8799,4.9689;-4.3092,-3.6872,4.9554;-2.2155,-3.1778,6.2122;1.4301,-3.9489,-.6403;2.1954,-3.4645,-1.0993;.5002,.1917,-4.6974;-3.0652,-1.6719,-.0066;-2.8611,-.9089,1.1424;-1.7829,-.2716,1.4479;-.3072,.5983,1.1562;-.346,1.4449,-.4993;1.0336,-.6561,1.4107;-.3262,1.8446,2.5553;-3.8214,-.8728,2.056;-3.5598,-.2516,3.3056;-.1329,.7216,-1.3037;.4574,2.2034,-.5171;-1.3053,1.9579,-.6787;1.0251,-1.0028,2.4575;2.0152,-.2037,1.1955;.9255,-1.5083,.7205;-.406,1.345,3.5374;.6112,2.4314,2.5507;-1.1655,2.5572,2.457;-2.6971,-.721,3.8073;-4.4685,-.4023,3.9047;-3.37,.827,3.1735;4.8601,-.772,.9933;4.4056,-2.0885,.8422;3.7531,-2.7351,1.8843;3.5737,-2.0535,3.0845;4.086,-.7763,3.293;4.7369,-.1424,2.2393;4.489,-2.576,-.1307;3.3335,-3.7335,1.7513;2.7124,-2.6483,4.1113;3.9289,-.2764,4.2495;5.1035,.8804,2.3652;-.827,.4032,-4.3014;-1.7977,-.567,-4.5067;-1.4298,-1.754,-5.1284;-.1329,-1.9765,-5.5791;.8302,-1.0019,-5.3544;-1.088,1.3219,-3.7719;-2.8278,-.4313,-4.1678;-2.4335,-2.8074,-5.2939;.113,-2.9132,-6.0792;1.8598,-1.1801,-5.6699;2.4122,-1.9612,5.0682;2.3073,-3.7778,3.9311;-2.1868,-3.7095,-6.0655;-3.4528,-2.7253,-4.6379;7.0487,1.1688,-1.4713;6.0767,1.556,-2.4394;8.4093,1.5319,-1.6663;8.8008,2.2304,-2.7823;9.1443,1.2343,-.9122;9.8513,2.4995,-2.9241;6.5178,2.2608,-3.5937;7.8423,2.589,-3.7602;5.7879,2.5338,-4.3595;8.1593,3.1253,-4.6592;3.331,3.1166,-3.246;2.2032,3.5261,-4.0164;4.1176,4.1277,-2.6245;3.8319,5.4612,-2.803;4.9557,3.8392,-1.9883;4.4519,6.2171,-2.3123;1.9428,4.9134,-4.1961;2.7414,5.8644,-3.6099;1.0807,5.2104,-4.8016;2.5278,6.9294,-3.7493;-4.4734,-2.1375,-.2973;-4.4653,-2.946,-1.0485;-4.9952,-2.4947,.605;-5.0828,-1.3179,-.7235;-2.1765,-1.3987,-1.1935;-2.3066,-.3598,-1.5492;-1.0987,-1.5346,-1.003;-2.4379,-2.0591,-2.034;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650297972688</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003173343587 0.000538550404 0.017661117321 0.005338669225</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030339145 -0.001856930 0.000177808 0.000202207 0.000241650 0.000351982 0.000358692 0.000390176 0.000535143 0.000674668 0.000782135 0.000869882 0.000907997 0.001029594 0.001143553 0.001180922 0.001258999 0.001418453 0.001540945 0.001662806 0.001770816 0.001892752 0.002161283 0.002266923 0.002302820 0.002527142 0.002887785 0.003147350 0.003256650 0.003406613 0.003512630 0.003996245 0.004215839 0.004584670 0.005334253 0.005420157 0.005565832 0.005975949 0.006492476 0.006775550 0.007395736 0.007695044 0.008192112 0.008748296 0.008994557 0.009187801 0.009571753 0.009887536 0.010899964 0.011067698 0.012111513 0.012324278 0.012955159 0.013345849 0.014106350 0.014657939 0.015031957 0.015275853 0.015359978 0.015546173 0.016174343 0.016854628 0.018064215 0.018477770 0.018813951 0.019706384 0.019977482 0.020974277 0.021332520 0.022052351 0.022824592 0.024296747 0.024908163 0.025901314 0.026387852 0.027199269 0.028795891 0.028859014 0.031005767 0.031511495 0.032282211 0.033506757 0.034150251 0.035386459 0.037545406 0.038373637 0.039267966 0.039772560 0.040827210 0.043417700 0.044055944 0.044426530 0.045571350 0.048482374 0.049202733 0.049656840 0.050227235 0.051008588 0.052142199 0.052342778 0.052400589 0.052638931 0.053571620 0.054097086 0.054747606 0.055141414 0.055905428 0.056368896 0.056484688 0.057178286 0.058224179 0.059353492 0.059602650 0.060703648 0.061173294 0.062027216 0.062149847 0.062415513 0.064923095 0.065747964 0.065978255 0.066618102 0.067568013 0.071950697 0.073827100 0.074876314 0.076965626 0.080747787 0.083735812 0.085132391 0.085958732 0.086394286 0.087535147 0.089858922 0.090844577 0.093912290 0.094515012 0.095626268 0.095861748 0.097401462 0.097638077 0.098912811 0.099275516 0.099950343 0.100299398 0.101301793 0.101541268 0.102674326 0.103118067 0.103815603 0.104605992 0.106513933 0.107210401 0.107384921 0.109135736 0.109736880 0.111025919 0.112364389 0.113209820 0.114093832 0.117359029 0.118685485 0.119572445 0.121280874 0.123983763 0.125100164 0.126032619 0.130689307 0.133861030 0.134829146 0.141756250 0.142427605 0.145173244 0.146178840 0.147918510 0.150033287 0.150673862 0.152690627 0.154864737 0.158805208 0.160415708 0.172220734 0.173024030 0.175790338 0.182823376 0.183505743 0.188139507 0.188731420 0.191484127 0.193321274 0.196700598 0.198054478 0.202590912 0.205214686 0.206753498 0.209630217 0.209932271 0.212984644 0.213970853 0.216563638 0.218455948 0.224393464 0.225047609 0.229836671 0.233747314 0.234468609 0.235006635 0.243694526 0.254605545 0.256604356 0.260900342 0.265763784 0.278431784 0.282279302 0.286074979 0.288652563 0.292764557 0.300521481 0.304539987 0.305071468 0.306266867 0.313966331 0.314728330 0.321704200 0.325763268 0.329336494 0.346263651 0.348373836 0.350914930 0.354613709 0.354901316 0.360985218 0.361763622 0.377320039 0.378448750 0.389549155 0.408991443 0.422458320 0.426366068 0.450494912 0.466467587 0.468652595 0.475631837 0.480542740 0.481002665 0.487463080 0.502852882 0.508732060 0.533426662 0.564671818 0.567284692 0.585499289 0.592184410 0.599167593 0.603407885 0.637409243 0.641664641 0.644427662 0.669730729 0.672644985 0.683755880 0.686507966 0.691245329 0.698178112 0.703857987 0.714479648 0.732112466 0.738775207 0.749953062 0.759435389 0.771868677 0.776713361 0.805861925 0.809571698 0.812856157 0.816111005 0.820087630 0.822141466 0.829558013 0.830895267 0.831739358 0.841246179 0.844912011 0.846031580 0.855681497 0.857587758 0.863762481 0.864643214 0.870948613 0.875227130 0.883357153 0.887493610 0.891644603 0.895991312 0.918075779 0.922261393 0.930676435 0.932605618 0.963856224 0.975316767 0.983952424 0.999429822 1.011371098 1.024374114 1.040041554 1.047667546 1.054780938 1.060866626 1.085439186 1.086370418 1.097148844 1.104823756 1.111619864 1.112360956 1.122776143 1.123671519 1.135015837 1.139105948 1.170554596 1.173576898 1.179853913 1.185704338 1.194072721 1.214034124 1.220313033 1.265455562 1.296101564 1.313753334 1.325137533 1.325915639 1.328390160 1.329592371 1.333824145 1.341609496 1.344511923 1.355606686 1.374948927 1.380762974 1.380975801 1.388944610 1.418579972 1.420451827 1.551044414 1.660046437 1.772344609</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">83</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34595093" y3="-0.00706138" z3="-0.18614128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39051403" y3="0.14974309" z3="0.42000835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64287719" y3="0.41688618" z3="-0.33325046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70012752" y3="1.2006089" z3="-2.23229427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38301451" y3="0.36994616" z3="-1.17079451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69979871" y3="0.80158816" z3="-3.63138959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58848094" y3="1.70947027" z3="-3.08522725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3110413" y3="2.5441112" z3="-4.52938925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52104776" y3="1.19992529" z3="-4.32929898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.42382987" y3="2.87625969" z3="-5.07735551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92357406" y3="-0.52938562" z3="-3.44200097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10219151" y3="-0.04937884" z3="-0.99247727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41706859" y3="-1.18177211" z3="-2.01256143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94471042" y3="-1.07296616" z3="-1.82790554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13394049" y3="-2.50078584" z3="-1.88679805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12664302" y3="-3.57580548" z3="0.63725117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02970388" y3="-5.33829451" z3="-4.74038825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25396687" y3="-5.05354672" z3="-3.7090037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83910157" y3="-4.293905" z3="-1.10565258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77903555" y3="-4.66277955" z3="-2.85968187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5728344" y3="-5.09282223" z3="-3.2552444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86630976" y3="-4.70631817" z3="-1.95005794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49839256" y3="-4.29928592" z3="-1.54145457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81490701" y3="-4.62282352" z3="-3.2021224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37829758" y3="-5.39543832" z3="-3.92728989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90437275" y3="-4.70382633" z3="-1.61195606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01962154" y3="-3.81646178" z3="0.20633371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15504333" y3="-3.59233935" z3="0.85568534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04741912" y3="-4.05298451" z3="0.42856819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14497404" y3="-3.44594723" z3="2.32153919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19653542" y3="-3.24457006" z3="5.11844039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34312851" y3="-3.62880358" z3="3.02786992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97238427" y3="-3.16822289" z3="3.03988647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99559236" y3="-3.06888013" z3="4.42813066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36826388" y3="-3.52993941" z3="4.4160753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26242463" y3="-3.85832921" z3="2.48216522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01166894" y3="-3.05271856" z3="2.53283823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.063025" y3="-2.87578937" z3="4.96607085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30832926" y3="-3.68341031" z3="4.95329461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21373805" y3="-3.17500676" z3="6.2096505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4299062" y3="-3.95281584" z3="-0.64072041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19606028" y3="-3.4704819" z3="-1.099485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49824794" y3="0.18813971" z3="-4.69444171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06325566" y3="-1.66464032" z3="-0.00780753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8553303" y3="-0.9022131" z3="1.14043875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.77932257" y3="-0.26343467" z3="1.44362004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.30132907" y3="0.60540536" z3="1.15064626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.33678778" y3="1.44409704" z3="-0.50906001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.03899109" y3="-0.64952225" z3="1.41269355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32392777" y3="1.8555568" z3="2.54577362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.81212775" y3="-0.86789758" z3="2.05685898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.55000202" y3="-0.24642197" z3="3.30406204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.13063274" y3="0.7119835" z3="-1.31050808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.47503735" y3="2.19806879" z3="-0.53470555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.29477386" y3="1.96760857" z3="-0.68757354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02594612" y3="-0.99523983" z3="2.46034282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.02442314" y3="-0.1997473" z3="1.20134322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.93147423" y3="-1.50340033" z3="0.72345112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40116943" y3="1.35759532" z3="3.52795603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60998714" y3="2.44590693" z3="2.54120028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16603194" y3="2.56238003" z3="2.44587404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.68868856" y3="-0.71322461" z3="3.80642173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.45684858" y3="-0.39774864" z3="3.9034853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.3613646" y3="0.83089296" z3="3.16975531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86199466" y3="-0.77742343" z3="0.99383832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40732287" y3="-2.09352278" z3="0.84394841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75461914" y3="-2.73931921" z3="1.88644104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5752404" y3="-2.05722449" z3="3.0860183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.08815612" y3="-0.78065132" z3="3.29345598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.73954554" y3="-0.14772595" z3="2.23953451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48995465" y3="-2.58132255" z3="-0.1290136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33525069" y3="-3.73734497" z3="1.75490323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71273983" y3="-2.65092747" z3="4.11248335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.93087338" y3="-0.28039989" z3="4.24925587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.10602995" y3="0.87471514" z3="2.36425353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83046412" y3="0.39711267" z3="-4.2998726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80087585" y3="-0.57424092" z3="-4.51082653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43168033" y3="-1.76001434" z3="-5.13485325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13221382" y3="-1.98010785" z3="-5.5826115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8298399" y3="-1.00435865" z3="-5.35292016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.095522" y3="1.31502202" z3="-3.7670014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82552028" y3="-0.43164094" z3="-4.17578069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43364885" y3="-2.81401645" z3="-5.30222507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11554713" y3="-2.91627139" z3="-6.0832572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85907171" y3="-1.18253843" z3="-5.667095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.4124584" y3="-1.96304565" z3="5.06861104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30683784" y3="-3.78012752" z3="3.93270756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18245077" y3="-3.71689421" z3="-6.07134509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45587035" y3="-2.73194204" z3="-4.65014143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.046989" y3="1.16848782" z3="-1.47032205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07407954" y3="1.55504832" z3="-2.43768608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.40695076" y3="1.53501644" z3="-1.6652731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.79659892" y3="2.23562988" z3="-2.78041462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14313643" y3="1.23793991" z3="-0.91190701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.84653461" y3="2.50712412" z3="-2.92221898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51334817" y3="2.26323698" z3="-3.5909145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8369136" y3="2.59352435" z3="-3.75754968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.78240603" y3="2.53570392" z3="-4.35585949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.15258473" y3="3.1317219" z3="-4.65580681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.32304513" y3="3.11373867" z3="-3.23622425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.19404538" y3="3.52383143" z3="-4.00452749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.10808108" y3="4.12473215" z3="-2.61224726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.82166606" y3="5.45694338" z3="-2.78860621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.94804742" y3="3.83539462" z3="-1.97868849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.44077679" y3="6.21252613" z3="-2.29639074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.93249231" y3="4.91000507" z3="-4.181757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.73033335" y3="5.86000868" z3="-3.59418415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.07069745" y3="5.20578734" z3="-4.7878375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.51875959" y3="6.92222795" z3="-3.73465927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47295377" y3="-2.12902646" z3="-0.29453152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46726891" y3="-2.93877048" z3="-1.0441747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99354288" y3="-2.4840902" z3="0.60914679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08232455" y3="-1.30973812" z3="-0.72128821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17768581" y3="-1.39444648" z3="-1.19791296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30873739" y3="-0.35622434" z3="-1.55525758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09888795" y3="-1.53062278" z3="-1.01077886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44226323" y3="-2.05661984" z3="-2.03636852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.346,-.0071,-.1861;7.3905,.1497,.42;6.6429,.4169,-.3333;4.7001,1.2006,-2.2323;4.383,.3699,-1.1708;2.6998,.8016,-3.6314;3.5885,1.7095,-3.0852;1.311,2.5441,-4.5294;1.521,1.1999,-4.3293;.4238,2.8763,-5.0774;2.9236,-.5294,-3.442;3.1022,-.0494,-.9925;2.4171,-1.1818,-2.0126;.9447,-1.073,-1.8279;3.1339,-2.5008,-1.8868;-.1266,-3.5758,.6373;-.0297,-5.3383,-4.7404;-.254,-5.0535,-3.709;-.8391,-4.2939,-1.1057;.779,-4.6628,-2.8597;-1.5728,-5.0928,-3.2552;-1.8663,-4.7063,-1.9501;.4984,-4.2993,-1.5415;1.8149,-4.6228,-3.2021;-2.3783,-5.3954,-3.9273;-2.9044,-4.7038,-1.612;-1.0196,-3.8165,.2063;-2.155,-3.5923,.8557;-3.0474,-4.053,.4286;-2.145,-3.4459,2.3215;-2.1965,-3.2446,5.1184;-3.3431,-3.6288,3.0279;-.9724,-3.1682,3.0399;-.9956,-3.0689,4.4281;-3.3683,-3.5299,4.4161;-4.2624,-3.8583,2.4822;-.0117,-3.0527,2.5328;-.063,-2.8758,4.9661;-4.3083,-3.6834,4.9533;-2.2137,-3.175,6.2097;1.4299,-3.9528,-.6407;2.1961,-3.4705,-1.0995;.4982,.1881,-4.6944;-3.0633,-1.6646,-.0078;-2.8553,-.9022,1.1404;-1.7793,-.2634,1.4436;-.3013,.6054,1.1506;-.3368,1.4441,-.5091;1.039,-.6495,1.4127;-.3239,1.8556,2.5458;-3.8121,-.8679,2.0569;-3.55,-.2464,3.3041;-.1306,.712,-1.3105;.475,2.1981,-.5347;-1.2948,1.9676,-.6876;1.0259,-.9952,2.4603;2.0244,-.1997,1.2013;.9315,-1.5034,.7235;-.4012,1.3576,3.528;.61,2.4459,2.5412;-1.166,2.5624,2.4459;-2.6887,-.7132,3.8064;-4.4568,-.3977,3.9035;-3.3614,.8309,3.1698;4.862,-.7774,.9938;4.4073,-2.0935,.8439;3.7546,-2.7393,1.8864;3.5752,-2.0572,3.086;4.0882,-.7807,3.2935;4.7395,-.1477,2.2395;4.49,-2.5813,-.129;3.3353,-3.7373,1.7549;2.7127,-2.6509,4.1125;3.9309,-.2804,4.2493;5.106,.8747,2.3643;-.8305,.3971,-4.2999;-1.8009,-.5742,-4.5108;-1.4317,-1.76,-5.1349;-.1322,-1.9801,-5.5826;.8298,-1.0044,-5.3529;-1.0955,1.315,-3.767;-2.8255,-.4316,-4.1758;-2.4336,-2.814,-5.3022;.1155,-2.9163,-6.0833;1.8591,-1.1825,-5.6671;2.4125,-1.963,5.0686;2.3068,-3.7801,3.9327;-2.1825,-3.7169,-6.0713;-3.4559,-2.7319,-4.6501;7.047,1.1685,-1.4703;6.0741,1.555,-2.4377;8.407,1.535,-1.6653;8.7966,2.2356,-2.7804;9.1431,1.2379,-.9119;9.8465,2.5071,-2.9222;6.5133,2.2632,-3.5909;7.8369,2.5935,-3.7575;5.7824,2.5357,-4.3559;8.1526,3.1317,-4.6558;3.323,3.1137,-3.2362;2.194,3.5238,-4.0045;4.1081,4.1247,-2.6122;3.8217,5.4569,-2.7886;4.948,3.8354,-1.9787;4.4408,6.2125,-2.2964;1.9325,4.91,-4.1818;2.7303,5.86,-3.5942;1.0707,5.2058,-4.7878;2.5188,6.9222,-3.7347;-4.473,-2.129,-.2945;-4.4673,-2.9388,-1.0442;-4.9935,-2.4841,.6091;-5.0823,-1.3097,-.7213;-2.1777,-1.3944,-1.1979;-2.3087,-.3562,-1.5553;-1.0989,-1.5306,-1.0108;-2.4423,-2.0566,-2.0364;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650280853793</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002807519992 0.000549272490 0.019736266919 0.005339948416</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030342161 -0.001847384 0.000177018 0.000207558 0.000247718 0.000352617 0.000358803 0.000390262 0.000540089 0.000674830 0.000784446 0.000873337 0.000907754 0.001031185 0.001142730 0.001190019 0.001259079 0.001431231 0.001549758 0.001663710 0.001771284 0.001892416 0.002161624 0.002267924 0.002317328 0.002537978 0.002898434 0.003144716 0.003264532 0.003416771 0.003521815 0.004002931 0.004214890 0.004595143 0.005334075 0.005421746 0.005568390 0.005987451 0.006491763 0.006780745 0.007395918 0.007707631 0.008226881 0.008851502 0.009068496 0.009421076 0.009649207 0.009893457 0.010900853 0.011067646 0.012136686 0.012339162 0.013012631 0.013351314 0.014110213 0.014671852 0.015039388 0.015275661 0.015371814 0.015555977 0.016174771 0.016855510 0.018074947 0.018488821 0.018814090 0.019716591 0.019978731 0.020982712 0.021337241 0.022052806 0.022825852 0.024321938 0.024910093 0.025903377 0.026389315 0.027201206 0.028797666 0.028866463 0.031014032 0.031518679 0.032295831 0.033511770 0.034151799 0.035424140 0.037545679 0.038375774 0.039299838 0.039788915 0.040848542 0.043418339 0.044101961 0.044484113 0.045628946 0.048491826 0.049203287 0.049670627 0.050250671 0.051011296 0.052145273 0.052343660 0.052404566 0.052638951 0.053571420 0.054097181 0.054765598 0.055143869 0.055905215 0.056368721 0.056486161 0.057190521 0.058251846 0.059502344 0.060081756 0.060706782 0.061177012 0.062074248 0.062221295 0.062416740 0.064923773 0.065754780 0.065979206 0.066740240 0.067614232 0.071955283 0.073827078 0.074877656 0.076966197 0.080753001 0.083740137 0.085175226 0.085962686 0.086401241 0.087550151 0.089861693 0.090847978 0.093912825 0.094515220 0.095632147 0.095864244 0.097403795 0.097657919 0.098932983 0.099275948 0.099971377 0.100408403 0.101352974 0.101544560 0.102676414 0.103126404 0.103844110 0.104605987 0.106514625 0.107226380 0.107385457 0.109142449 0.109736814 0.111036994 0.112364810 0.113210245 0.114124175 0.117359062 0.118692260 0.119594317 0.121309582 0.124104827 0.125105398 0.126040222 0.130691266 0.133862053 0.134831289 0.141766351 0.142430444 0.145224590 0.146198940 0.147922226 0.150131302 0.150696268 0.152690647 0.154898091 0.158832724 0.160472573 0.172220423 0.173034951 0.175795225 0.182842440 0.183506220 0.188192466 0.188771741 0.191486465 0.193322104 0.196706285 0.198147640 0.202622958 0.205294052 0.206753497 0.209630232 0.209958029 0.212985045 0.213972670 0.216562968 0.218487293 0.224409367 0.225067127 0.229864056 0.233760415 0.234487832 0.235018364 0.243701234 0.254683405 0.256608874 0.260968683 0.265937759 0.278439040 0.282307527 0.286076272 0.288682970 0.292777931 0.300542147 0.304544307 0.305103954 0.306322322 0.314014755 0.314730287 0.321713466 0.326208435 0.329396231 0.346336843 0.348413272 0.350942398 0.354619919 0.355325307 0.361055154 0.361778610 0.377609161 0.378488404 0.389556600 0.408991937 0.422543595 0.426448702 0.450495413 0.466468995 0.468677745 0.475634332 0.480543996 0.481011573 0.487490014 0.502864891 0.508790332 0.533435849 0.564705540 0.567292559 0.585575528 0.592193381 0.599444947 0.603434497 0.637416051 0.641751239 0.644496944 0.670092564 0.672695192 0.683760396 0.686922883 0.691245335 0.698234069 0.703860364 0.714497293 0.732822913 0.738775615 0.749955562 0.759440465 0.771868945 0.776717140 0.805862313 0.809582391 0.812867464 0.816158447 0.820093244 0.822209581 0.829583627 0.830936473 0.831797268 0.841280453 0.844913772 0.846034718 0.855682363 0.857592800 0.863764450 0.864645149 0.870948835 0.875408552 0.883373412 0.887538154 0.891645320 0.896064041 0.918093180 0.922264992 0.930731561 0.932646271 0.963860747 0.975316912 0.983953345 0.999477757 1.011417871 1.024376361 1.040064986 1.047680203 1.054958386 1.061065850 1.085487670 1.086370434 1.097417740 1.104838905 1.111650277 1.112366678 1.122779310 1.123673324 1.135015851 1.139139534 1.170557537 1.173897277 1.179960314 1.185783389 1.194073223 1.214050602 1.220407617 1.265473262 1.296157619 1.313798483 1.325181813 1.326085763 1.328765688 1.329622989 1.333824198 1.341623235 1.344520149 1.355694191 1.374956489 1.380852059 1.381068627 1.389142042 1.418650869 1.420524663 1.551046004 1.660052311 1.772355585</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">84</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34639345" y3="-0.01077163" z3="-0.18535456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39065975" y3="0.14610387" z3="0.41908336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64256223" y3="0.41444006" z3="-0.3330121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69797158" y3="1.19919575" z3="-2.22940453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38275682" y3="0.36661838" z3="-1.16883952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69610274" y3="0.79965971" z3="-3.62567561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58428552" y3="1.70761679" z3="-3.07975094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.30415994" y3="2.54081989" z3="-4.51951689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.51568712" y3="1.19731201" z3="-4.32132519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4163704" y3="2.87264491" z3="-5.06674895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92335252" y3="-0.53174501" z3="-3.43956221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10267628" y3="-0.05435173" z3="-0.99017627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41829146" y3="-1.18661857" z3="-2.01072781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94583489" y3="-1.07882107" z3="-1.82567801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13614085" y3="-2.50506532" z3="-1.88620353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12492637" y3="-3.57215644" z3="0.63396913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02992975" y3="-5.34410749" z3="-4.74185496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25353892" y3="-5.05777596" z3="-3.71067284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83824521" y3="-4.29050039" z3="-1.10838508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78122439" y3="-4.67028392" z3="-2.86089362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57466147" y3="-5.08901688" z3="-3.25775471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86747888" y3="-4.69933827" z3="-1.95319351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50081658" y3="-4.30359989" z3="-1.54315304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81891692" y3="-4.63712022" z3="-3.20338851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3820258" y3="-5.38878633" z3="-3.93004188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90762749" y3="-4.68916287" z3="-1.61591745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01840065" y3="-3.81076871" z3="0.20281134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15370134" y3="-3.58719153" z3="0.85234894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04516202" y3="-4.0485601" z3="0.4255322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1434329" y3="-3.4414039" z3="2.31831709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19490329" y3="-3.24081309" z3="5.11529539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34158299" y3="-3.62424966" z3="3.02464508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97050381" y3="-3.16459769" z3="3.03680317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99378588" y3="-3.06538367" z3="4.42506319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36676157" y3="-3.52558762" z3="4.41288971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26094489" y3="-3.85363709" z3="2.47904817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0097876" y3="-3.04898204" z3="2.52989612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06112959" y3="-2.87272234" z3="4.96308626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30682557" y3="-3.67914934" z3="4.95003235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21230444" y3="-3.17114329" z3="6.206477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43322789" y3="-3.95996752" z3="-0.64195601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19853365" y3="-3.47707164" z3="-1.09992566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49502181" y3="0.18240988" z3="-4.69223564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06270846" y3="-1.65965779" z3="-0.00945649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8522339" y3="-0.89689414" z3="1.13783038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.77200142" y3="-0.26105503" z3="1.43739336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.29557188" y3="0.60864096" z3="1.1449523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.3272797" y3="1.44420103" z3="-0.51677531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.04288726" y3="-0.6467266" z3="1.41473768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32051398" y3="1.86546491" z3="2.53522419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.80780809" y3="-0.85971262" z3="2.05579988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.54054954" y3="-0.23982466" z3="3.30382385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.11498116" y3="0.71760135" z3="-1.31622171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.4770108" y3="2.2001157" z3="-0.53664262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.2845" y3="1.96180562" z3="-0.70107187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02567008" y3="-0.99124392" z3="2.46257438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0277189" y3="-0.19687143" z3="1.20630981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.9371825" y3="-1.50084124" z3="0.72573988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4003145" y3="1.37256233" z3="3.52075951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61443239" y3="2.45562271" z3="2.52845371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1620426" y3="2.57435513" z3="2.43098496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.67614978" y3="-0.70867916" z3="3.8016153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.44544871" y3="-0.39133473" z3="3.90736458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.35245375" y3="0.83770874" z3="3.17012008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86307953" y3="-0.78174916" z3="0.9943986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4071323" y3="-2.09770619" z3="0.84402173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75470867" y3="-2.74316481" z3="1.88695904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57660832" y3="-2.06086841" z3="3.08712212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.09090348" y3="-0.78460132" z3="3.29496066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.74187665" y3="-0.15206445" z3="2.24050307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48869715" y3="-2.58542321" z3="-0.12931697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33466528" y3="-3.74121158" z3="1.75534619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71421504" y3="-2.6537664" z3="4.11416409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.93483555" y3="-0.28434073" z3="4.25147221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.10889632" y3="0.87040858" z3="2.36517787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83486251" y3="0.39050367" z3="-4.30194526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80325177" y3="-0.58065825" z3="-4.51548203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43029228" y3="-1.76593493" z3="-5.13812093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13012854" y3="-1.9849074" z3="-5.58178619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83016359" y3="-1.00914206" z3="-5.35087882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.10000592" y3="1.30737834" z3="-3.77069134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8361964" y3="-0.44760567" z3="-4.18268014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43185672" y3="-2.8212566" z3="-5.31155906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11988576" y3="-2.92035614" z3="-6.08274355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8612948" y3="-1.18516276" z3="-5.66166213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41480089" y3="-1.96539106" z3="5.07062247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30770112" y3="-3.78275633" z3="3.93470884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.1776895" y3="-3.72415419" z3="-6.07995423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45672312" y3="-2.73902705" z3="-4.66439106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04484443" y3="1.16809156" z3="-1.46934408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07096184" y3="1.55511661" z3="-2.43552036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.40387309" y3="1.53608316" z3="-1.66464736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.79184956" y3="2.23846574" z3="-2.77914018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14078022" y3="1.23944137" z3="-0.91186599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.84111768" y3="2.51091225" z3="-2.92128403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50836684" y3="2.26494764" z3="-3.58806712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.83127646" y3="2.5967407" z3="-3.75517853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.77684191" y3="2.5383672" z3="-4.3520374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.14555062" y3="3.13623188" z3="-4.65299221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.31789817" y3="3.11004919" z3="-3.22978828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.18694851" y3="3.51966286" z3="-3.99556453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1027111" y3="4.1202353" z3="-2.60560832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.81253612" y3="5.45314035" z3="-2.7775175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.94322892" y3="3.83112892" z3="-1.97282818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.43104485" y3="6.20839845" z3="-2.28454757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.92214987" y3="4.90628629" z3="-4.16894594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.71928245" y3="5.85629856" z3="-3.58063645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.05843604" y3="5.20275655" z3="-4.77225976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.50204516" y3="6.92083086" z3="-3.71492301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47260981" y3="-2.12260217" z3="-0.29360211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46891174" y3="-2.93268305" z3="-1.04253212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99148202" y3="-2.47648572" z3="0.61138541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08198256" y3="-1.30286241" z3="-0.71956975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1786317" y3="-1.39034904" z3="-1.20037892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30891722" y3="-0.35189176" z3="-1.55840869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10015249" y3="-1.52764409" z3="-1.01402405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44452148" y3="-2.05264975" z3="-2.03792273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3464,-.0108,-.1854;7.3907,.1461,.4191;6.6426,.4144,-.333;4.698,1.1992,-2.2294;4.3828,.3666,-1.1688;2.6961,.7997,-3.6257;3.5843,1.7076,-3.0798;1.3042,2.5408,-4.5195;1.5157,1.1973,-4.3213;.4164,2.8726,-5.0667;2.9234,-.5317,-3.4396;3.1027,-.0544,-.9902;2.4183,-1.1866,-2.0107;.9458,-1.0788,-1.8257;3.1361,-2.5051,-1.8862;-.1249,-3.5722,.634;-.0299,-5.3441,-4.7419;-.2535,-5.0578,-3.7107;-.8382,-4.2905,-1.1084;.7812,-4.6703,-2.8609;-1.5747,-5.089,-3.2578;-1.8675,-4.6993,-1.9532;.5008,-4.3036,-1.5432;1.8189,-4.6371,-3.2034;-2.382,-5.3888,-3.93;-2.9076,-4.6892,-1.6159;-1.0184,-3.8108,.2028;-2.1537,-3.5872,.8523;-3.0452,-4.0486,.4255;-2.1434,-3.4414,2.3183;-2.1949,-3.2408,5.1153;-3.3416,-3.6242,3.0246;-.9705,-3.1646,3.0368;-.9938,-3.0654,4.4251;-3.3668,-3.5256,4.4129;-4.2609,-3.8536,2.479;-.0098,-3.049,2.5299;-.0611,-2.8727,4.9631;-4.3068,-3.6791,4.95;-2.2123,-3.1711,6.2065;1.4332,-3.96,-.642;2.1985,-3.4771,-1.0999;.495,.1824,-4.6922;-3.0627,-1.6597,-.0095;-2.8522,-.8969,1.1378;-1.772,-.2611,1.4374;-.2956,.6086,1.145;-.3273,1.4442,-.5168;1.0429,-.6467,1.4147;-.3205,1.8655,2.5352;-3.8078,-.8597,2.0558;-3.5405,-.2398,3.3038;-.115,.7176,-1.3162;.477,2.2001,-.5366;-1.2845,1.9618,-.7011;1.0257,-.9912,2.4626;2.0277,-.1969,1.2063;.9372,-1.5008,.7257;-.4003,1.3726,3.5208;.6144,2.4556,2.5285;-1.162,2.5744,2.431;-2.6761,-.7087,3.8016;-4.4454,-.3913,3.9074;-3.3525,.8377,3.1701;4.8631,-.7817,.9944;4.4071,-2.0977,.844;3.7547,-2.7432,1.887;3.5766,-2.0609,3.0871;4.0909,-.7846,3.295;4.7419,-.1521,2.2405;4.4887,-2.5854,-.1293;3.3347,-3.7412,1.7553;2.7142,-2.6538,4.1142;3.9348,-.2843,4.2515;5.1089,.8704,2.3652;-.8349,.3905,-4.3019;-1.8033,-.5807,-4.5155;-1.4303,-1.7659,-5.1381;-.1301,-1.9849,-5.5818;.8302,-1.0091,-5.3509;-1.1,1.3074,-3.7707;-2.8362,-.4476,-4.1827;-2.4319,-2.8213,-5.3116;.1199,-2.9204,-6.0827;1.8613,-1.1852,-5.6617;2.4148,-1.9654,5.0706;2.3077,-3.7828,3.9347;-2.1777,-3.7242,-6.08;-3.4567,-2.739,-4.6644;7.0448,1.1681,-1.4693;6.071,1.5551,-2.4355;8.4039,1.5361,-1.6646;8.7918,2.2385,-2.7791;9.1408,1.2394,-.9119;9.8411,2.5109,-2.9213;6.5084,2.2649,-3.5881;7.8313,2.5967,-3.7552;5.7768,2.5384,-4.352;8.1456,3.1362,-4.653;3.3179,3.11,-3.2298;2.1869,3.5197,-3.9956;4.1027,4.1202,-2.6056;3.8125,5.4531,-2.7775;4.9432,3.8311,-1.9728;4.431,6.2084,-2.2845;1.9221,4.9063,-4.1689;2.7193,5.8563,-3.5806;1.0584,5.2028,-4.7723;2.502,6.9208,-3.7149;-4.4726,-2.1226,-.2936;-4.4689,-2.9327,-1.0425;-4.9915,-2.4765,.6114;-5.082,-1.3029,-.7196;-2.1786,-1.3903,-1.2004;-2.3089,-.3519,-1.5584;-1.1002,-1.5276,-1.014;-2.4445,-2.0526,-2.0379;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650265268661</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002747171829 0.000526972621 0.025007240616 0.005336712603</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030342236 -0.001729148 0.000176993 0.000205672 0.000251430 0.000352167 0.000360176 0.000393215 0.000546306 0.000682015 0.000784990 0.000885734 0.000926206 0.001033100 0.001153920 0.001207121 0.001272001 0.001434800 0.001575751 0.001667444 0.001773014 0.001905059 0.002163711 0.002270666 0.002316886 0.002540840 0.002901026 0.003145290 0.003265668 0.003430308 0.003538095 0.004002763 0.004214715 0.004593993 0.005334931 0.005425143 0.005568682 0.005986681 0.006510574 0.006784899 0.007408323 0.007710187 0.008225484 0.008873390 0.009077411 0.009500056 0.009864157 0.009973703 0.010901133 0.011067648 0.012152441 0.012375443 0.013037606 0.013352370 0.014109540 0.014673027 0.015038033 0.015279499 0.015371612 0.015558503 0.016174527 0.016858922 0.018077157 0.018487497 0.018813752 0.019726738 0.019978887 0.020990425 0.021344211 0.022053174 0.022826692 0.024352383 0.024928388 0.025904374 0.026391511 0.027200922 0.028799147 0.028869291 0.031020685 0.031525979 0.032322921 0.033511107 0.034160956 0.035431976 0.037546748 0.038380984 0.039308201 0.039849935 0.040870586 0.043420778 0.044114477 0.044521634 0.045657385 0.048511834 0.049204549 0.049672488 0.050270374 0.051013041 0.052145074 0.052343825 0.052409870 0.052645228 0.053576084 0.054097527 0.054769412 0.055146797 0.055905813 0.056369303 0.056487770 0.057202609 0.058256123 0.059525476 0.060658874 0.060708557 0.061178202 0.062096361 0.062362683 0.062421921 0.064925715 0.065763084 0.065983495 0.066866335 0.067758213 0.071968517 0.073828062 0.074877648 0.076966184 0.080755793 0.083749513 0.085199883 0.085963275 0.086400398 0.087562848 0.089862991 0.090850237 0.093913809 0.094515619 0.095632617 0.095872429 0.097404470 0.097687024 0.098935216 0.099277974 0.099971527 0.100497165 0.101435228 0.101546256 0.102680576 0.103143368 0.103846346 0.104624672 0.106517814 0.107224920 0.107389202 0.109141779 0.109737631 0.111036148 0.112365204 0.113210836 0.114146528 0.117359461 0.118692926 0.119594187 0.121337804 0.124182053 0.125113660 0.126044332 0.130692633 0.133883000 0.134850324 0.141785081 0.142430194 0.145268202 0.146197230 0.147929925 0.150260884 0.150758384 0.152692064 0.154912963 0.158901766 0.160494694 0.172225073 0.173034138 0.175800583 0.182846483 0.183509848 0.188236103 0.188776909 0.191496247 0.193323032 0.196707232 0.198212715 0.202647276 0.205346207 0.206753515 0.209630230 0.209978425 0.212985037 0.213980969 0.216571641 0.218488817 0.224410880 0.225085977 0.229882001 0.233796554 0.234526808 0.235034426 0.243708849 0.254762353 0.256609675 0.261031729 0.266106710 0.278441420 0.282334347 0.286076870 0.288745023 0.292807787 0.300547498 0.304551632 0.305148407 0.306407089 0.314048167 0.314740079 0.321717077 0.326520698 0.329439564 0.346333825 0.348428200 0.350969902 0.354620577 0.355564851 0.361086987 0.361779424 0.378006315 0.378611604 0.389558826 0.408996965 0.422590109 0.426446107 0.450499462 0.466470792 0.468706345 0.475634976 0.480547932 0.481011364 0.487489186 0.502864583 0.508826639 0.533450225 0.564733661 0.567312460 0.585714979 0.592201177 0.599713187 0.603477797 0.637443833 0.641797660 0.644574355 0.670291922 0.672725773 0.683773853 0.687455713 0.691245956 0.698304033 0.703862885 0.714505412 0.733497815 0.738775612 0.749955723 0.759441681 0.771869053 0.776718358 0.805898613 0.809589165 0.812877243 0.816161696 0.820109515 0.822344239 0.829589763 0.830991902 0.831826018 0.841280901 0.844914490 0.846040567 0.855975383 0.857595708 0.863764365 0.864646945 0.870951601 0.875551962 0.883395740 0.887596154 0.891646584 0.896127828 0.918093223 0.922283043 0.930755193 0.932689920 0.963864161 0.975325112 0.983957801 0.999497759 1.011430991 1.024392417 1.040079444 1.047734072 1.055118533 1.061252826 1.085517949 1.086375643 1.097734539 1.104843970 1.111677119 1.112380168 1.122783905 1.123677131 1.135016006 1.139153656 1.170559342 1.174119573 1.180015166 1.185834886 1.194073241 1.214090854 1.220461922 1.265475259 1.296177254 1.313826465 1.325187840 1.326254094 1.329189818 1.329715681 1.333863289 1.341623121 1.344523329 1.355780465 1.374956439 1.380867272 1.381227786 1.389342121 1.418684741 1.420554979 1.551047924 1.660066163 1.772357109</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">85</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34700775" y3="-0.01426759" z3="-0.18396682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39200207" y3="0.14696425" z3="0.42017106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64273122" y3="0.41334243" z3="-0.33184133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69569347" y3="1.19556849" z3="-2.22712328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38214923" y3="0.36176535" z3="-1.16710958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69449834" y3="0.79468503" z3="-3.62446145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.5813019" y3="1.70358694" z3="-3.07683535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.29883804" y3="2.5351387" z3="-4.51430299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.51358053" y3="1.19087992" z3="-4.32013827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.40974583" y3="2.86698599" z3="-5.05938136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92235809" y3="-0.53585227" z3="-3.43869499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10264049" y3="-0.06125899" z3="-0.98828761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41937113" y3="-1.19310463" z3="-2.01022482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94693351" y3="-1.08785281" z3="-1.82354918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13946753" y3="-2.51081049" z3="-1.88839586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12522456" y3="-3.56508265" z3="0.62944782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02780807" y3="-5.3521891" z3="-4.74079759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25245947" y3="-5.06144085" z3="-3.71087958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83850886" y3="-4.286627" z3="-1.11148125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78181616" y3="-4.67557137" z3="-2.86064301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57355177" y3="-5.08764939" z3="-3.25988603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86737901" y3="-4.69347786" z3="-1.95683921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50015203" y3="-4.30399355" z3="-1.54445091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8193367" y3="-4.64599331" z3="-3.20124682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.38055673" y3="-5.38609776" z3="-3.93250641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90670668" y3="-4.68083373" z3="-1.62136463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01839244" y3="-3.80480904" z3="0.19899411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15335444" y3="-3.58194077" z3="0.84908804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04512158" y3="-4.04313595" z3="0.42221217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14280984" y3="-3.436521" z3="2.31501307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19338946" y3="-3.23975025" z3="5.11226369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3406595" y3="-3.62020759" z3="3.02114632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97013241" y3="-3.1599508" z3="3.03364788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99292564" y3="-3.0627464" z3="4.4221199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36540268" y3="-3.5234537" z3="4.40953341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26011682" y3="-3.84870389" z3="2.47512672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00995829" y3="-3.04297061" z3="2.52666129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06043422" y3="-2.8705938" z3="4.96054951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30516959" y3="-3.67789542" z3="4.9464743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21019902" y3="-3.17179488" z3="6.20361646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43190349" y3="-3.96105322" z3="-0.64302124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20128337" y3="-3.48245037" z3="-1.10180563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49440777" y3="0.17712911" z3="-4.69035795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06353957" y3="-1.65391641" z3="-0.0115877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.84737018" y3="-0.8910845" z3="1.1352737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.76462795" y3="-0.25875697" z3="1.43214512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.29028682" y3="0.61348367" z3="1.14144442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.32173265" y3="1.44408212" z3="-0.52202262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.04792744" y3="-0.63979079" z3="1.41556982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.31900244" y3="1.8730187" z3="2.52791706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.80062836" y3="-0.85017461" z3="2.05621227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.52602642" y3="-0.23261654" z3="3.30438962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.11889474" y3="0.70567452" z3="-1.32002028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.49315831" y3="2.19541368" z3="-0.55182868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.27790281" y3="1.96598635" z3="-0.70320244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02814634" y3="-0.98263604" z3="2.46365472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.03369435" y3="-0.19127071" z3="1.20868198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.94373846" y3="-1.49492773" z3="0.72765916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39581191" y3="1.38332079" z3="3.51440578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61297165" y3="2.46660534" z3="2.51903639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16294671" y3="2.57685349" z3="2.42106228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.66459887" y3="-0.710168" z3="3.79997662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.43227665" y3="-0.3763652" z3="3.90860313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.32744651" y3="0.84491454" z3="3.17299816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86494857" y3="-0.78533985" z3="0.99624014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40679746" y3="-2.10058381" z3="0.84540433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75373074" y3="-2.74563974" z3="1.88810074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57755845" y3="-2.06363977" z3="3.08878293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.09451298" y3="-0.78833811" z3="3.29732807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.74599654" y3="-0.15612606" z3="2.24299938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48731051" y3="-2.58806967" z3="-0.12803282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33110231" y3="-3.74284001" z3="1.75543706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71463298" y3="-2.65586573" z3="4.11573769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.9396536" y3="-0.28809823" z3="4.25392308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.11528799" y3="0.86577382" z3="2.36860413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83645529" y3="0.38304191" z3="-4.30220724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80444995" y3="-0.58855512" z3="-4.51998856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43062848" y3="-1.77233754" z3="-5.14488135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1286157" y3="-1.99002421" z3="-5.58577156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83095709" y3="-1.01362276" z3="-5.34909688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.10554393" y3="1.29915934" z3="-3.76881866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83041571" y3="-0.44742063" z3="-4.18988521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43063081" y3="-2.82665453" z3="-5.32097004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.12316162" y3="-2.92485578" z3="-6.08661485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86217423" y3="-1.18959669" z3="-5.65794717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41471207" y3="-1.96684435" z3="5.0712382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30793946" y3="-3.78486526" z3="3.93684908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.17295591" y3="-3.72994442" z3="-6.08771181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45802719" y3="-2.74461246" z3="-4.677309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04334476" y3="1.16726538" z3="-1.46822619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.068226" y3="1.55371811" z3="-2.43346254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.40188283" y3="1.53748547" z3="-1.66404508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.78819463" y3="2.24261161" z3="-2.77766903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.13958619" y3="1.24010031" z3="-0.91238062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.83715909" y3="2.51754562" z3="-2.91996096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50389816" y3="2.26592647" z3="-3.58533011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.82642942" y3="2.60107105" z3="-3.75250546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.77115091" y3="2.53874511" z3="-4.34844773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.13945742" y3="3.14308212" z3="-4.64953616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.31151757" y3="3.10685342" z3="-3.22285797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.17903996" y3="3.51597034" z3="-3.98662566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.09465492" y3="4.11798195" z3="-2.59677025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.80184178" y3="5.45038471" z3="-2.76545198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.93789451" y3="3.82861598" z3="-1.96736868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.41977542" y3="6.20588875" z3="-2.27200222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.91074257" y3="4.90273049" z3="-4.15569623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.70591884" y3="5.85362027" z3="-3.56507943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.04580912" y3="5.19851341" z3="-4.75754847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.48918132" y3="6.91613283" z3="-3.69924879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47570208" y3="-2.1151071" z3="-0.29086882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47638744" y3="-2.92820417" z3="-1.03774844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99344996" y3="-2.46514325" z3="0.6167974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08416005" y3="-1.29523278" z3="-0.71775371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18146648" y3="-1.38748309" z3="-1.20504327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3113286" y3="-0.34916468" z3="-1.56331299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1025326" y3="-1.52657203" z3="-1.02054486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45027005" y3="-2.05038103" z3="-2.04160179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.347,-.0143,-.184;7.392,.147,.4202;6.6427,.4133,-.3318;4.6957,1.1956,-2.2271;4.3821,.3618,-1.1671;2.6945,.7947,-3.6245;3.5813,1.7036,-3.0768;1.2988,2.5351,-4.5143;1.5136,1.1909,-4.3201;.4097,2.867,-5.0594;2.9224,-.5359,-3.4387;3.1026,-.0613,-.9883;2.4194,-1.1931,-2.0102;.9469,-1.0879,-1.8235;3.1395,-2.5108,-1.8884;-.1252,-3.5651,.6294;-.0278,-5.3522,-4.7408;-.2525,-5.0614,-3.7109;-.8385,-4.2866,-1.1115;.7818,-4.6756,-2.8606;-1.5736,-5.0876,-3.2599;-1.8674,-4.6935,-1.9568;.5002,-4.304,-1.5445;1.8193,-4.646,-3.2012;-2.3806,-5.3861,-3.9325;-2.9067,-4.6808,-1.6214;-1.0184,-3.8048,.199;-2.1534,-3.5819,.8491;-3.0451,-4.0431,.4222;-2.1428,-3.4365,2.315;-2.1934,-3.2398,5.1123;-3.3407,-3.6202,3.0211;-.9701,-3.16,3.0336;-.9929,-3.0627,4.4221;-3.3654,-3.5235,4.4095;-4.2601,-3.8487,2.4751;-.01,-3.043,2.5267;-.0604,-2.8706,4.9605;-4.3052,-3.6779,4.9465;-2.2102,-3.1718,6.2036;1.4319,-3.9611,-.643;2.2013,-3.4825,-1.1018;.4944,.1771,-4.6904;-3.0635,-1.6539,-.0116;-2.8474,-.8911,1.1353;-1.7646,-.2588,1.4321;-.2903,.6135,1.1414;-.3217,1.4441,-.522;1.0479,-.6398,1.4156;-.319,1.873,2.5279;-3.8006,-.8502,2.0562;-3.526,-.2326,3.3044;-.1189,.7057,-1.32;.4932,2.1954,-.5518;-1.2779,1.966,-.7032;1.0281,-.9826,2.4637;2.0337,-.1913,1.2087;.9437,-1.4949,.7277;-.3958,1.3833,3.5144;.613,2.4666,2.519;-1.1629,2.5769,2.4211;-2.6646,-.7102,3.8;-4.4323,-.3764,3.9086;-3.3274,.8449,3.173;4.8649,-.7853,.9962;4.4068,-2.1006,.8454;3.7537,-2.7456,1.8881;3.5776,-2.0636,3.0888;4.0945,-.7883,3.2973;4.746,-.1561,2.243;4.4873,-2.5881,-.128;3.3311,-3.7428,1.7554;2.7146,-2.6559,4.1157;3.9397,-.2881,4.2539;5.1153,.8658,2.3686;-.8365,.383,-4.3022;-1.8044,-.5886,-4.52;-1.4306,-1.7723,-5.1449;-.1286,-1.99,-5.5858;.831,-1.0136,-5.3491;-1.1055,1.2992,-3.7688;-2.8304,-.4474,-4.1899;-2.4306,-2.8267,-5.321;.1232,-2.9249,-6.0866;1.8622,-1.1896,-5.6579;2.4147,-1.9668,5.0712;2.3079,-3.7849,3.9368;-2.173,-3.7299,-6.0877;-3.458,-2.7446,-4.6773;7.0433,1.1673,-1.4682;6.0682,1.5537,-2.4335;8.4019,1.5375,-1.664;8.7882,2.2426,-2.7777;9.1396,1.2401,-.9124;9.8372,2.5175,-2.92;6.5039,2.2659,-3.5853;7.8264,2.6011,-3.7525;5.7712,2.5387,-4.3484;8.1395,3.1431,-4.6495;3.3115,3.1069,-3.2229;2.179,3.516,-3.9866;4.0947,4.118,-2.5968;3.8018,5.4504,-2.7655;4.9379,3.8286,-1.9674;4.4198,6.2059,-2.272;1.9107,4.9027,-4.1557;2.7059,5.8536,-3.5651;1.0458,5.1985,-4.7575;2.4892,6.9161,-3.6992;-4.4757,-2.1151,-.2909;-4.4764,-2.9282,-1.0377;-4.9934,-2.4651,.6168;-5.0842,-1.2952,-.7178;-2.1815,-1.3875,-1.205;-2.3113,-.3492,-1.5633;-1.1025,-1.5266,-1.0205;-2.4503,-2.0504,-2.0416;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650241246956</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003726261731 0.000566618288 0.016706359614 0.005333815468</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030342259 -0.002025435 0.000175925 0.000214367 0.000257038 0.000352749 0.000360050 0.000391699 0.000549437 0.000688002 0.000787002 0.000885313 0.000955875 0.001034297 0.001162409 0.001212175 0.001311357 0.001435832 0.001581260 0.001680196 0.001774674 0.001940621 0.002188529 0.002272748 0.002383196 0.002540683 0.002902629 0.003145856 0.003270382 0.003447437 0.003550139 0.004007959 0.004215841 0.004612283 0.005334963 0.005445657 0.005569190 0.005989346 0.006542999 0.006785437 0.007431101 0.007761594 0.008234273 0.008874649 0.009081145 0.009521145 0.009889067 0.010203378 0.010911962 0.011070995 0.012155237 0.012415556 0.013033259 0.013352568 0.014114792 0.014673901 0.015049773 0.015300253 0.015381278 0.015558165 0.016179573 0.016858009 0.018076800 0.018490088 0.018815273 0.019743551 0.019979021 0.020993723 0.021349997 0.022053100 0.022826900 0.024371925 0.024962580 0.025904268 0.026392214 0.027201536 0.028798982 0.028871054 0.031023025 0.031529717 0.032348758 0.033524556 0.034210719 0.035431157 0.037549999 0.038400864 0.039307775 0.039911920 0.040885916 0.043439456 0.044113321 0.044545094 0.045672503 0.048526350 0.049205311 0.049672830 0.050277733 0.051012791 0.052148077 0.052343809 0.052411928 0.052656215 0.053625908 0.054098834 0.054769061 0.055146649 0.055907331 0.056369436 0.056487648 0.057209058 0.058256511 0.059532336 0.060707191 0.061177727 0.061287708 0.062106705 0.062394005 0.062610573 0.064930095 0.065769462 0.065986326 0.066942190 0.068009521 0.071980268 0.073828735 0.074878008 0.076966343 0.080757147 0.083756119 0.085196817 0.085963775 0.086407604 0.087564659 0.089867104 0.090849743 0.093914998 0.094515789 0.095667096 0.095884677 0.097404407 0.097684974 0.099004143 0.099280126 0.099972658 0.100541847 0.101498658 0.101551431 0.102715412 0.103152957 0.103849357 0.104674860 0.106528390 0.107238825 0.107454718 0.109167827 0.109741655 0.111051887 0.112366076 0.113212385 0.114168332 0.117360985 0.118692911 0.119596114 0.121346215 0.124185378 0.125114349 0.126043818 0.130695075 0.133885722 0.134884007 0.141788278 0.142433757 0.145276751 0.146220927 0.147974641 0.150420404 0.150885207 0.152700263 0.154910691 0.158961744 0.160492833 0.172232569 0.173055978 0.175800417 0.182846770 0.183535397 0.188250983 0.188776888 0.191502021 0.193325594 0.196707293 0.198221318 0.202692152 0.205351656 0.206753513 0.209630236 0.209994322 0.212987360 0.214013595 0.216640330 0.218496520 0.224413764 0.225098628 0.229890018 0.233824187 0.234576584 0.235040468 0.243713138 0.254821655 0.256609718 0.261080233 0.266230237 0.278441830 0.282343582 0.286077191 0.288824125 0.292862861 0.300547597 0.304554625 0.305174969 0.306497781 0.314064252 0.314748976 0.321717001 0.326733068 0.329471352 0.346494438 0.348434785 0.351002511 0.354620635 0.355659978 0.361085652 0.361781396 0.378197235 0.378799064 0.389558803 0.409004447 0.422623123 0.426593280 0.450504931 0.466470655 0.468713687 0.475635069 0.480560535 0.481055012 0.487572940 0.502867470 0.508870145 0.533458577 0.564757043 0.567340113 0.585799113 0.592202020 0.599898352 0.603550697 0.637560692 0.641798327 0.644605435 0.670375850 0.672726647 0.683786482 0.687947588 0.691247117 0.698328419 0.703874695 0.714513840 0.734337505 0.738775708 0.749961012 0.759466739 0.771869482 0.776718365 0.806011759 0.809589129 0.812880581 0.816245643 0.820142492 0.822459842 0.829593608 0.831097354 0.831825765 0.841325459 0.844914616 0.846045094 0.856942073 0.857600514 0.863767125 0.864648822 0.870966522 0.875664510 0.883411328 0.887609950 0.891650591 0.896174949 0.918133327 0.922315370 0.930755750 0.932737486 0.963864950 0.975339198 0.983966568 0.999502469 1.011431586 1.024435121 1.040090959 1.047860882 1.055239108 1.061414427 1.085519919 1.086411454 1.098046233 1.104849063 1.111703435 1.112416483 1.122794281 1.123718799 1.135016007 1.139154585 1.170559375 1.174288092 1.180039079 1.185836587 1.194073240 1.214148092 1.220461453 1.265477980 1.296181672 1.313844344 1.325187576 1.326292223 1.329498760 1.329894395 1.333925281 1.341630702 1.344531935 1.355794375 1.374959962 1.380868123 1.381289738 1.389500641 1.418684570 1.420634800 1.551047944 1.660070733 1.772359199</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">86</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3481003" y3="-0.01913618" z3="-0.18351041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39285249" y3="0.14539391" z3="0.41970707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64292899" y3="0.41105795" z3="-0.331732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.6936011" y3="1.19243922" z3="-2.22478082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38224997" y3="0.356152" z3="-1.16592157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69140134" y3="0.79083583" z3="-3.62038372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.57700914" y3="1.70003325" z3="-3.07194411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.29257558" y3="2.53068361" z3="-4.50603567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50940385" y3="1.18705017" z3="-4.31391324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.40350259" y3="2.86113548" z3="-5.05192779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92274197" y3="-0.54055888" z3="-3.43824233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10353144" y3="-0.0690181" z3="-0.98735462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42060405" y3="-1.19999503" z3="-2.01032617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94809636" y3="-1.09521478" z3="-1.82327326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14063793" y3="-2.51745564" z3="-1.88909286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12453922" y3="-3.56249951" z3="0.62582577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02893169" y3="-5.35550721" z3="-4.74152406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2533619" y3="-5.06368714" z3="-3.71221198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83913067" y3="-4.2843946" z3="-1.11427423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78092115" y3="-4.67894439" z3="-2.86142716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5742365" y3="-5.08713697" z3="-3.26220087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86795974" y3="-4.6905281" z3="-1.96005799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50017794" y3="-4.30710446" z3="-1.54562336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81862117" y3="-4.65197219" z3="-3.2008683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3805456" y3="-5.38636557" z3="-3.93492887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9079115" y3="-4.67383799" z3="-1.62551254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01873401" y3="-3.80040751" z3="0.19546219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15329099" y3="-3.57649549" z3="0.84623354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04605043" y3="-4.03632731" z3="0.41931908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14187747" y3="-3.43227931" z3="2.31231653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19167503" y3="-3.23661492" z3="5.10963363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33976697" y3="-3.61510358" z3="3.01895854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96851165" y3="-3.15719399" z3="3.03051151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99092002" y3="-3.06065922" z3="4.41900352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36406756" y3="-3.5190874" z3="4.40737385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25943703" y3="-3.84278595" z3="2.47328343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00815228" y3="-3.04109703" z3="2.52295516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.05812862" y3="-2.86952917" z3="4.95719431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30391819" y3="-3.67292296" z3="4.94474006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20808131" y3="-3.16955079" z3="6.20101333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43370808" y3="-3.96838358" z3="-0.64312126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20044802" y3="-3.48864304" z3="-1.10053167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49229865" y3="0.17111521" z3="-4.6898723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06235413" y3="-1.64641762" z3="-0.01098138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.84276476" y3="-0.88458651" z3="1.13523069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.76059028" y3="-0.25253599" z3="1.42987076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.28364145" y3="0.6173306" z3="1.13651507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.31143752" y3="1.44288825" z3="-0.52995563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0532209" y3="-0.63690786" z3="1.4173149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.31342763" y3="1.88182375" z3="2.5195417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.79243749" y3="-0.84513666" z3="2.05856718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.51842924" y3="-0.22585872" z3="3.30384784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.10330104" y3="0.71172608" z3="-1.32560328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.49728728" y3="2.19429256" z3="-0.55379788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.26621703" y3="1.96905111" z3="-0.71639861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02872523" y3="-0.97920012" z3="2.46584583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.04061023" y3="-0.18963453" z3="1.21394487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.95006148" y3="-1.49209463" z3="0.72930929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39338927" y3="1.39401358" z3="3.50727912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.62015244" y3="2.47410673" z3="2.51116601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.15678178" y3="2.58751224" z3="2.40968202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.65662397" y3="-0.69615858" z3="3.80060174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.42120818" y3="-0.3731372" z3="3.90981987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.32612565" y3="0.84975452" z3="3.16782673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86728589" y3="-0.79071675" z3="0.99686717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40904945" y3="-2.10563446" z3="0.84708479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75597307" y3="-2.7499409" z3="1.89026851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57941847" y3="-2.06747922" z3="3.0900498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.09663539" y3="-0.7926503" z3="3.29754757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.74855971" y3="-0.16129416" z3="2.24304227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48917082" y3="-2.59343529" z3="-0.12609695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33397356" y3="-3.74690345" z3="1.75914422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.7158646" y3="-2.65876439" z3="4.11701316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.94176639" y3="-0.29213082" z3="4.25371822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.11766471" y3="0.86027054" z3="2.36751821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83915425" y3="0.37677564" z3="-4.30467573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80539017" y3="-0.59478912" z3="-4.52667481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42839431" y3="-1.77767107" z3="-5.15122191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12610087" y3="-1.99462204" z3="-5.58930451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83189201" y3="-1.01839626" z3="-5.35071981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.10784872" y3="1.29168175" z3="-3.77220005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.84028934" y3="-0.46412699" z3="-4.19794849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42806632" y3="-2.83257889" z3="-5.3313275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.12716102" y3="-2.92847311" z3="-6.09198157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86466959" y3="-1.19231824" z3="-5.65747591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41602673" y3="-1.96897687" z3="5.07217298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30887498" y3="-3.78775827" z3="3.93871179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.16719" y3="-3.73596249" z3="-6.09660683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45814986" y3="-2.75060439" z3="-4.69234961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04174207" y3="1.16831314" z3="-1.46719232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06537623" y3="1.55435665" z3="-2.43133754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39957997" y3="1.541961" z3="-1.66314191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.78382361" y3="2.24908416" z3="-2.77599852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.13857476" y3="1.24523265" z3="-0.91238159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.83210655" y3="2.52592402" z3="-2.91854789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49904367" y3="2.26962717" z3="-3.58220328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.82066663" y3="2.6068199" z3="-3.74977322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.76537311" y3="2.54211326" z3="-4.34451501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.13209128" y3="3.15030783" z3="-4.64619496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.30463597" y3="3.10265125" z3="-3.2148473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.1714705" y3="3.5108996" z3="-3.97778045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.08587972" y3="4.11372403" z3="-2.58647712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.79108435" y3="5.44557843" z3="-2.75287012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.92813207" y3="3.82570438" z3="-1.95579542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.40666564" y3="6.20181307" z3="-2.25653071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.90151637" y3="4.89653978" z3="-4.14508356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.69576751" y3="5.84697067" z3="-3.55358676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.03575382" y3="5.19192422" z3="-4.74583296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.47463923" y3="6.91075251" z3="-3.68318221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47580038" y3="-2.10494044" z3="-0.28699439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47863834" y3="-2.91806228" z3="-1.03261272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99241379" y3="-2.45330545" z3="0.62123142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08382121" y3="-1.28455582" z3="-0.71371861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18379156" y3="-1.38215068" z3="-1.20757438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31367219" y3="-0.34464693" z3="-1.56735273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10451065" y3="-1.52153629" z3="-1.02657707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45552603" y3="-2.04622343" z3="-2.04228811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3481,-.0191,-.1835;7.3929,.1454,.4197;6.6429,.4111,-.3317;4.6936,1.1924,-2.2248;4.3822,.3562,-1.1659;2.6914,.7908,-3.6204;3.577,1.7,-3.0719;1.2926,2.5307,-4.506;1.5094,1.1871,-4.3139;.4035,2.8611,-5.0519;2.9227,-.5406,-3.4382;3.1035,-.069,-.9874;2.4206,-1.2,-2.0103;.9481,-1.0952,-1.8233;3.1406,-2.5175,-1.8891;-.1245,-3.5625,.6258;-.0289,-5.3555,-4.7415;-.2534,-5.0637,-3.7122;-.8391,-4.2844,-1.1143;.7809,-4.6789,-2.8614;-1.5742,-5.0871,-3.2622;-1.868,-4.6905,-1.9601;.5002,-4.3071,-1.5456;1.8186,-4.652,-3.2009;-2.3805,-5.3864,-3.9349;-2.9079,-4.6738,-1.6255;-1.0187,-3.8004,.1955;-2.1533,-3.5765,.8462;-3.0461,-4.0363,.4193;-2.1419,-3.4323,2.3123;-2.1917,-3.2366,5.1096;-3.3398,-3.6151,3.019;-.9685,-3.1572,3.0305;-.9909,-3.0607,4.419;-3.3641,-3.5191,4.4074;-4.2594,-3.8428,2.4733;-.0082,-3.0411,2.523;-.0581,-2.8695,4.9572;-4.3039,-3.6729,4.9447;-2.2081,-3.1696,6.201;1.4337,-3.9684,-.6431;2.2004,-3.4886,-1.1005;.4923,.1711,-4.6899;-3.0624,-1.6464,-.011;-2.8428,-.8846,1.1352;-1.7606,-.2525,1.4299;-.2836,.6173,1.1365;-.3114,1.4429,-.53;1.0532,-.6369,1.4173;-.3134,1.8818,2.5195;-3.7924,-.8451,2.0586;-3.5184,-.2259,3.3038;-.1033,.7117,-1.3256;.4973,2.1943,-.5538;-1.2662,1.9691,-.7164;1.0287,-.9792,2.4658;2.0406,-.1896,1.2139;.9501,-1.4921,.7293;-.3934,1.394,3.5073;.6202,2.4741,2.5112;-1.1568,2.5875,2.4097;-2.6566,-.6962,3.8006;-4.4212,-.3731,3.9098;-3.3261,.8498,3.1678;4.8673,-.7907,.9969;4.409,-2.1056,.8471;3.756,-2.7499,1.8903;3.5794,-2.0675,3.09;4.0966,-.7927,3.2975;4.7486,-.1613,2.243;4.4892,-2.5934,-.1261;3.334,-3.7469,1.7591;2.7159,-2.6588,4.117;3.9418,-.2921,4.2537;5.1177,.8603,2.3675;-.8392,.3768,-4.3047;-1.8054,-.5948,-4.5267;-1.4284,-1.7777,-5.1512;-.1261,-1.9946,-5.5893;.8319,-1.0184,-5.3507;-1.1078,1.2917,-3.7722;-2.8403,-.4641,-4.1979;-2.4281,-2.8326,-5.3313;.1272,-2.9285,-6.092;1.8647,-1.1923,-5.6575;2.416,-1.969,5.0722;2.3089,-3.7878,3.9387;-2.1672,-3.736,-6.0966;-3.4581,-2.7506,-4.6923;7.0417,1.1683,-1.4672;6.0654,1.5544,-2.4313;8.3996,1.542,-1.6631;8.7838,2.2491,-2.776;9.1386,1.2452,-.9124;9.8321,2.5259,-2.9185;6.499,2.2696,-3.5822;7.8207,2.6068,-3.7498;5.7654,2.5421,-4.3445;8.1321,3.1503,-4.6462;3.3046,3.1027,-3.2148;2.1715,3.5109,-3.9778;4.0859,4.1137,-2.5865;3.7911,5.4456,-2.7529;4.9281,3.8257,-1.9558;4.4067,6.2018,-2.2565;1.9015,4.8965,-4.1451;2.6958,5.847,-3.5536;1.0358,5.1919,-4.7458;2.4746,6.9108,-3.6832;-4.4758,-2.1049,-.287;-4.4786,-2.9181,-1.0326;-4.9924,-2.4533,.6212;-5.0838,-1.2846,-.7137;-2.1838,-1.3822,-1.2076;-2.3137,-.3446,-1.5674;-1.1045,-1.5215,-1.0266;-2.4555,-2.0462,-2.0423;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650214241370</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005277430578 0.000620099934 0.019143831390 0.005334599955</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030342150 -0.002327153 0.000174138 0.000214655 0.000257739 0.000352900 0.000360136 0.000392213 0.000550532 0.000687408 0.000787306 0.000886863 0.000954604 0.001034041 0.001165530 0.001215511 0.001306309 0.001442382 0.001586527 0.001683462 0.001775792 0.001948428 0.002190508 0.002273597 0.002431317 0.002604767 0.002919957 0.003153675 0.003291499 0.003449128 0.003548157 0.004021910 0.004219568 0.004631057 0.005341247 0.005478523 0.005574446 0.005992133 0.006554536 0.006804476 0.007436521 0.007792455 0.008262247 0.008877150 0.009083365 0.009531884 0.009910612 0.010329776 0.010929258 0.011091174 0.012155159 0.012437303 0.013088601 0.013356106 0.014116396 0.014677493 0.015065445 0.015311883 0.015423300 0.015559739 0.016191068 0.016890197 0.018077376 0.018489633 0.018822845 0.019775912 0.019979131 0.020993282 0.021351466 0.022052912 0.022826834 0.024378595 0.024982386 0.025904667 0.026392089 0.027202557 0.028799985 0.028871111 0.031023180 0.031529609 0.032357955 0.033539965 0.034262854 0.035432711 0.037566002 0.038425110 0.039310696 0.039927590 0.040887114 0.043468394 0.044147885 0.044584283 0.045679011 0.048526902 0.049205783 0.049681050 0.050278821 0.051014776 0.052156729 0.052343804 0.052411755 0.052659166 0.053726524 0.054107017 0.054773074 0.055148988 0.055908080 0.056369410 0.056488335 0.057210846 0.058256626 0.059531883 0.060707211 0.061177642 0.061826181 0.062111548 0.062393737 0.063061432 0.064938732 0.065772952 0.065986454 0.066984522 0.068329578 0.071983860 0.073828619 0.074879535 0.076969517 0.080757133 0.083755440 0.085243739 0.085966192 0.086414535 0.087564399 0.089881861 0.090850836 0.093939230 0.094515783 0.095726457 0.095900536 0.097407889 0.097721991 0.099151926 0.099282996 0.099985591 0.100551250 0.101509201 0.101555040 0.102775209 0.103151936 0.103855888 0.104736331 0.106544706 0.107243481 0.107646195 0.109280747 0.109761824 0.111105730 0.112366282 0.113220198 0.114195847 0.117361280 0.118695462 0.119596929 0.121345867 0.124198526 0.125116960 0.126048847 0.130704626 0.133885552 0.134895498 0.141794425 0.142434622 0.145276263 0.146286961 0.148019684 0.150503413 0.151132205 0.152735487 0.154926625 0.158992439 0.160524323 0.172236700 0.173090647 0.175805833 0.182850899 0.183584911 0.188252523 0.188778336 0.191501644 0.193342914 0.196710562 0.198228260 0.202770780 0.205360320 0.206753556 0.209630236 0.210015215 0.212996799 0.214058279 0.216702070 0.218526970 0.224423711 0.225108401 0.229891850 0.233826198 0.234601507 0.235040356 0.243716170 0.254860401 0.256611646 0.261125888 0.266332171 0.278443292 0.282343325 0.286081957 0.288891464 0.292941567 0.300547621 0.304556110 0.305181760 0.306596571 0.314069694 0.314752113 0.321717247 0.326843679 0.329498583 0.346951657 0.348451391 0.351055570 0.354620793 0.355690684 0.361103531 0.361784767 0.378252266 0.378864568 0.389560438 0.409008370 0.422641633 0.426915430 0.450508435 0.466470885 0.468713798 0.475635200 0.480566474 0.481150813 0.487787428 0.502869495 0.508902300 0.533468484 0.564774999 0.567376213 0.585856400 0.592202116 0.599933038 0.603619288 0.637689559 0.641808077 0.644608445 0.670382285 0.672732772 0.683792105 0.688203182 0.691247932 0.698328012 0.703882359 0.714529043 0.735524346 0.738775924 0.749972863 0.759525623 0.771869903 0.776720645 0.806164446 0.809596307 0.812882280 0.816432010 0.820182463 0.822558894 0.829616033 0.831276920 0.831849941 0.841401742 0.844918288 0.846056528 0.857592603 0.858936992 0.863768282 0.864653336 0.871003481 0.875807476 0.883413001 0.887634490 0.891654613 0.896222607 0.918184933 0.922338637 0.930756222 0.932765614 0.963865290 0.975345174 0.983976300 0.999502400 1.011431697 1.024505552 1.040106447 1.048071394 1.055319887 1.061558856 1.085521231 1.086472736 1.098387286 1.104891287 1.111734822 1.112486745 1.122830204 1.123845081 1.135016176 1.139180741 1.170559652 1.174415805 1.180059177 1.185849635 1.194073241 1.214235713 1.220500626 1.265480824 1.296187231 1.313860195 1.325200079 1.326293957 1.329611469 1.330256149 1.333950678 1.341634445 1.344537741 1.355794191 1.374960696 1.380869518 1.381289396 1.389539826 1.418700313 1.420648029 1.551049385 1.660070789 1.772364363</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">87</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34852962" y3="-0.02111229" z3="-0.18259218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3930034" y3="0.1443083" z3="0.41951214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64255543" y3="0.41048572" z3="-0.33108564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69148635" y3="1.19106817" z3="-2.22234892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38182837" y3="0.35387407" z3="-1.16417052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68975672" y3="0.78690717" z3="-3.61823847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.57394453" y3="1.69707442" z3="-3.06891852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.28771174" y3="2.52538403" z3="-4.50155952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50736212" y3="1.18142548" z3="-4.31242887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.39764788" y3="2.85597937" z3="-5.04574105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9221079" y3="-0.54345627" z3="-3.43581793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10391206" y3="-0.07310371" z3="-0.985248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42113732" y3="-1.20412977" z3="-2.00816803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94867965" y3="-1.09980093" z3="-1.82046546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14188778" y3="-2.52139358" z3="-1.88818111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12399892" y3="-3.5592099" z3="0.62294181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03051678" y3="-5.36329155" z3="-4.74210624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25458416" y3="-5.06870118" z3="-3.7132219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.839583" y3="-4.28135864" z3="-1.11680389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78204297" y3="-4.68937727" z3="-2.86157023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57827985" y3="-5.08132036" z3="-3.26501666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87118804" y3="-4.68138595" z3="-1.96353277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50068562" y3="-4.31185234" z3="-1.54683526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82175281" y3="-4.67111602" z3="-3.2004504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.38768341" y3="-5.37460661" z3="-3.938526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.91237887" y3="-4.65713618" z3="-1.63044774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0183961" y3="-3.79542725" z3="0.19238277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1525253" y3="-3.5716943" z3="0.84356748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04495521" y3="-4.03144258" z3="0.41683367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14093138" y3="-3.42763812" z3="2.30961215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.1898578" y3="-3.23284767" z3="5.10702909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33919886" y3="-3.60840363" z3="3.01640125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96656114" y3="-3.15574209" z3="3.02782667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98865169" y3="-3.05941464" z3="4.41632378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36321336" y3="-3.5125267" z3="4.40483519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25962352" y3="-3.83424622" z3="2.47091943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00579859" y3="-3.04182736" z3="2.52038263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.05510638" y3="-2.87075737" z3="4.9544894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30336133" y3="-3.6647666" z3="4.9423028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20624859" y3="-3.16560478" z3="6.19836154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43380402" y3="-3.97421318" z3="-0.64444763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20322308" y3="-3.4963134" z3="-1.10212413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49220068" y3="0.16567115" z3="-4.68932246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0625014" y3="-1.64057302" z3="-0.01251818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.84064562" y3="-0.87823154" z3="1.13267718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.75409262" y3="-0.24914562" z3="1.42367925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.27810417" y3="0.62143502" z3="1.13407116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.3030893" y3="1.44644126" z3="-0.53295896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0556525" y3="-0.63578754" z3="1.41982164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.30883421" y3="1.88819646" z3="2.51432658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.79026919" y3="-0.83476902" z3="2.05683634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.50953524" y3="-0.21790463" z3="3.30402473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1030999" y3="0.70386447" z3="-1.32759516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.51413284" y3="2.19405492" z3="-0.56490746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.25631124" y3="1.9679062" z3="-0.71757542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02708411" y3="-0.97906571" z3="2.46789803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.04446014" y3="-0.19037689" z3="1.22019194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.95274386" y3="-1.49047084" z3="0.73090182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38919964" y3="1.40334968" z3="3.50325684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.62391397" y3="2.48099197" z3="2.5049874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.15194428" y3="2.59290973" z3="2.40197259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.64363486" y3="-0.69435792" z3="3.79416624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.41111887" y3="-0.36356015" z3="3.91465644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.31479217" y3="0.85901852" z3="3.17059801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86873417" y3="-0.79369861" z3="0.99753978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40929573" y3="-2.10846306" z3="0.84688032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75658089" y3="-2.75289771" z3="1.89028168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.58166312" y3="-2.07077339" z3="3.09114064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.10033719" y3="-0.79633943" z3="3.29951549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.75173081" y3="-0.16490292" z3="2.24464724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48828264" y3="-2.59588188" z3="-0.12685032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33351602" y3="-3.74978542" z3="1.7584393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71846221" y3="-2.66177135" z3="4.11858736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.94665702" y3="-0.29612661" z3="4.25640441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.12163314" y3="0.85658808" z3="2.36960791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84164687" y3="0.36755758" z3="-4.30739938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80701075" y3="-0.60491487" z3="-4.5324042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42761179" y3="-1.78631967" z3="-5.15818967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12234022" y3="-2.00008128" z3="-5.59282062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83433452" y3="-1.02276365" z3="-5.34905147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.11563191" y3="1.28174803" z3="-3.77229692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83527783" y3="-0.46655664" z3="-4.20804894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42527525" y3="-2.84260399" z3="-5.34370035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.13334093" y3="-2.93316003" z3="-6.09431005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86726952" y3="-1.19638255" z3="-5.65321094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.4187093" y3="-1.9717225" z3="5.07365625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31164114" y3="-3.79081852" z3="3.94067525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.16007797" y3="-3.74533598" z3="-6.10886112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45802865" y3="-2.76191017" z3="-4.70863331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03960358" y3="1.16898813" z3="-1.46590101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0622449" y3="1.55469286" z3="-2.42912692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39649809" y3="1.54475722" z3="-1.66196307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.77905466" y3="2.25413113" z3="-2.77402044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.13622846" y3="1.2489932" z3="-0.91161323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.82676966" y3="2.53303903" z3="-2.91661174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49401092" y3="2.27195053" z3="-3.57918988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.81501621" y3="2.61183113" z3="-3.74685057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75971513" y3="2.54508765" z3="-4.34061721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12503195" y3="3.15747061" z3="-4.64259495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.2990286" y3="3.09928153" z3="-3.2096396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.16427676" y3="3.50706232" z3="-3.97066389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.07878365" y3="4.11037063" z3="-2.58020516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.77911033" y3="5.44283236" z3="-2.74165586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.92328949" y3="3.82188189" z3="-1.95213426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.39455626" y3="6.19814731" z3="-2.24588405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.88951548" y3="4.89361315" z3="-4.13311932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.68091549" y3="5.84521738" z3="-3.53869153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.02329318" y3="5.18803122" z3="-4.73363345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.4590845" y3="6.90756311" z3="-3.66764843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47584446" y3="-2.09793774" z3="-0.28642214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48116937" y3="-2.91174596" z3="-1.03149631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99078546" y3="-2.44502101" z3="0.62347564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08373591" y3="-1.27712591" z3="-0.71240678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18458779" y3="-1.37645977" z3="-1.20872683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31313743" y3="-0.33786815" z3="-1.56801225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10557226" y3="-1.51806508" z3="-1.02783257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45725092" y3="-2.03962051" z3="-2.04331505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3485,-.0211,-.1826;7.393,.1443,.4195;6.6426,.4105,-.3311;4.6915,1.1911,-2.2223;4.3818,.3539,-1.1642;2.6898,.7869,-3.6182;3.5739,1.6971,-3.0689;1.2877,2.5254,-4.5016;1.5074,1.1814,-4.3124;.3976,2.856,-5.0457;2.9221,-.5435,-3.4358;3.1039,-.0731,-.9852;2.4211,-1.2041,-2.0082;.9487,-1.0998,-1.8205;3.1419,-2.5214,-1.8882;-.124,-3.5592,.6229;-.0305,-5.3633,-4.7421;-.2546,-5.0687,-3.7132;-.8396,-4.2814,-1.1168;.782,-4.6894,-2.8616;-1.5783,-5.0813,-3.265;-1.8712,-4.6814,-1.9635;.5007,-4.3119,-1.5468;1.8218,-4.6711,-3.2005;-2.3877,-5.3746,-3.9385;-2.9124,-4.6571,-1.6304;-1.0184,-3.7954,.1924;-2.1525,-3.5717,.8436;-3.045,-4.0314,.4168;-2.1409,-3.4276,2.3096;-2.1899,-3.2328,5.107;-3.3392,-3.6084,3.0164;-.9666,-3.1557,3.0278;-.9887,-3.0594,4.4163;-3.3632,-3.5125,4.4048;-4.2596,-3.8342,2.4709;-.0058,-3.0418,2.5204;-.0551,-2.8708,4.9545;-4.3034,-3.6648,4.9423;-2.2062,-3.1656,6.1984;1.4338,-3.9742,-.6444;2.2032,-3.4963,-1.1021;.4922,.1657,-4.6893;-3.0625,-1.6406,-.0125;-2.8406,-.8782,1.1327;-1.7541,-.2491,1.4237;-.2781,.6214,1.1341;-.3031,1.4464,-.533;1.0557,-.6358,1.4198;-.3088,1.8882,2.5143;-3.7903,-.8348,2.0568;-3.5095,-.2179,3.304;-.1031,.7039,-1.3276;.5141,2.1941,-.5649;-1.2563,1.9679,-.7176;1.0271,-.9791,2.4679;2.0445,-.1904,1.2202;.9527,-1.4905,.7309;-.3892,1.4033,3.5033;.6239,2.481,2.505;-1.1519,2.5929,2.402;-2.6436,-.6944,3.7942;-4.4111,-.3636,3.9147;-3.3148,.859,3.1706;4.8687,-.7937,.9975;4.4093,-2.1085,.8469;3.7566,-2.7529,1.8903;3.5817,-2.0708,3.0911;4.1003,-.7963,3.2995;4.7517,-.1649,2.2446;4.4883,-2.5959,-.1269;3.3335,-3.7498,1.7584;2.7185,-2.6618,4.1186;3.9467,-.2961,4.2564;5.1216,.8566,2.3696;-.8416,.3676,-4.3074;-1.807,-.6049,-4.5324;-1.4276,-1.7863,-5.1582;-.1223,-2.0001,-5.5928;.8343,-1.0228,-5.3491;-1.1156,1.2817,-3.7723;-2.8353,-.4666,-4.208;-2.4253,-2.8426,-5.3437;.1333,-2.9332,-6.0943;1.8673,-1.1964,-5.6532;2.4187,-1.9717,5.0737;2.3116,-3.7908,3.9407;-2.1601,-3.7453,-6.1089;-3.458,-2.7619,-4.7086;7.0396,1.169,-1.4659;6.0622,1.5547,-2.4291;8.3965,1.5448,-1.662;8.7791,2.2541,-2.774;9.1362,1.249,-.9116;9.8268,2.533,-2.9166;6.494,2.272,-3.5792;7.815,2.6118,-3.7469;5.7597,2.5451,-4.3406;8.125,3.1575,-4.6426;3.299,3.0993,-3.2096;2.1643,3.5071,-3.9707;4.0788,4.1104,-2.5802;3.7791,5.4428,-2.7417;4.9233,3.8219,-1.9521;4.3946,6.1981,-2.2459;1.8895,4.8936,-4.1331;2.6809,5.8452,-3.5387;1.0233,5.188,-4.7336;2.4591,6.9076,-3.6676;-4.4758,-2.0979,-.2864;-4.4812,-2.9117,-1.0315;-4.9908,-2.445,.6235;-5.0837,-1.2771,-.7124;-2.1846,-1.3765,-1.2087;-2.3131,-.3379,-1.568;-1.1056,-1.5181,-1.0278;-2.4573,-2.0396,-2.0433;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650190458309</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005927288005 0.000649054253 0.021923403000 0.005337003190</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030344332 -0.002534537 0.000169042 0.000233594 0.000253819 0.000352795 0.000360233 0.000399831 0.000551532 0.000688079 0.000821282 0.000888476 0.000965454 0.001035218 0.001165769 0.001223917 0.001339173 0.001441463 0.001621884 0.001684187 0.001786600 0.001952826 0.002202279 0.002290280 0.002430348 0.002659497 0.002925261 0.003155370 0.003324911 0.003449294 0.003621136 0.004045972 0.004218954 0.004651865 0.005349834 0.005494258 0.005583288 0.005991795 0.006553267 0.006822223 0.007436385 0.007791813 0.008270142 0.008878355 0.009083543 0.009535371 0.009937196 0.010333396 0.010926678 0.011108101 0.012155584 0.012434039 0.013152293 0.013365892 0.014116646 0.014680244 0.015072015 0.015310997 0.015426279 0.015559358 0.016192226 0.016953670 0.018076954 0.018499049 0.018828984 0.019860835 0.019979122 0.020993998 0.021351357 0.022053762 0.022826748 0.024378824 0.024986293 0.025904934 0.026394062 0.027202590 0.028801480 0.028870967 0.031023445 0.031529675 0.032356607 0.033540552 0.034266334 0.035433019 0.037599113 0.038429844 0.039351868 0.039930503 0.040889232 0.043486979 0.044195505 0.044627553 0.045680910 0.048528831 0.049207454 0.049697780 0.050279060 0.051019471 0.052166420 0.052343941 0.052411745 0.052659121 0.053781179 0.054128675 0.054773176 0.055158802 0.055907875 0.056370227 0.056488564 0.057210517 0.058257353 0.059532474 0.060708226 0.061177652 0.062043072 0.062137333 0.062398927 0.063640110 0.064952743 0.065772368 0.065990030 0.067025437 0.068695416 0.071987943 0.073833542 0.074884994 0.076974649 0.080757786 0.083760515 0.085369999 0.085971838 0.086420873 0.087564740 0.089903590 0.090850415 0.093982803 0.094515842 0.095733815 0.095907421 0.097412274 0.097841184 0.099273376 0.099381648 0.100041502 0.100551196 0.101508634 0.101554613 0.102829991 0.103161634 0.103856224 0.104797627 0.106563256 0.107243821 0.107903113 0.109489019 0.109853106 0.111243463 0.112366348 0.113247082 0.114230897 0.117361583 0.118707313 0.119600298 0.121369204 0.124349145 0.125162944 0.126065080 0.130735641 0.133924785 0.134901404 0.141847710 0.142443353 0.145276547 0.146350377 0.148032472 0.150526005 0.151427613 0.152783291 0.154929626 0.159010590 0.160555552 0.172240172 0.173089786 0.175830213 0.182850451 0.183614248 0.188257392 0.188781089 0.191504601 0.193386005 0.196730643 0.198322437 0.202890210 0.205484584 0.206753911 0.209630235 0.210050617 0.213017608 0.214138515 0.216705525 0.218547959 0.224425523 0.225117927 0.229892005 0.233851500 0.234601041 0.235043092 0.243718714 0.254892537 0.256618997 0.261176210 0.266430005 0.278448883 0.282353206 0.286088974 0.288933080 0.293020742 0.300547687 0.304558100 0.305182173 0.306697659 0.314073797 0.314751991 0.321717648 0.326872343 0.329524244 0.347171172 0.348512911 0.351137665 0.354622069 0.355719061 0.361136023 0.361785123 0.378251353 0.378863372 0.389560338 0.409010743 0.422652036 0.427019876 0.450508459 0.466474141 0.468731651 0.475635193 0.480566599 0.481178879 0.487926287 0.502870213 0.508932040 0.533472021 0.564791855 0.567410858 0.585878640 0.592203883 0.599932825 0.603675308 0.637692900 0.641812903 0.644609916 0.670388756 0.672770400 0.683792010 0.688268722 0.691248284 0.698348886 0.703882990 0.714551398 0.736902918 0.738776712 0.749987586 0.759562669 0.771869894 0.776725609 0.806282584 0.809623977 0.812899265 0.816700453 0.820219339 0.822710938 0.829637499 0.831492089 0.831902940 0.841406770 0.844931768 0.846073951 0.857594533 0.861631482 0.863792038 0.864670329 0.871056205 0.876048119 0.883415599 0.887806236 0.891654678 0.896286400 0.918187410 0.922346446 0.930760533 0.932782105 0.963865902 0.975346498 0.983979958 0.999503579 1.011431716 1.024572096 1.040135342 1.048284188 1.055364980 1.061724963 1.085521454 1.086523998 1.098813819 1.104990282 1.111771534 1.112590085 1.122903039 1.124103408 1.135017117 1.139223852 1.170560539 1.174474915 1.180069847 1.185875372 1.194073286 1.214314434 1.220553372 1.265480795 1.296187156 1.313864454 1.325272347 1.326390818 1.329636267 1.330548256 1.333966029 1.341635637 1.344543819 1.355825038 1.374960772 1.380873034 1.381304036 1.389539603 1.418718816 1.420696151 1.551049681 1.660075729 1.772372402</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">88</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34866942" y3="-0.02398915" z3="-0.18139149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3934794" y3="0.14601392" z3="0.42061333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64204431" y3="0.41051649" z3="-0.32984462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68875813" y3="1.1888229" z3="-2.22002177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38093316" y3="0.34968628" z3="-1.16259644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6874739" y3="0.783116" z3="-3.61577231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.56992897" y3="1.69429262" z3="-3.06536008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.28155477" y3="2.52029658" z3="-4.49586126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50426125" y3="1.17650883" z3="-4.30885501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.39122301" y3="2.8492226" z3="-5.04070661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92265684" y3="-0.54765718" z3="-3.43525864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1036585" y3="-0.07956704" z3="-0.98366094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42214059" y3="-1.21016512" z3="-2.00806652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94951933" y3="-1.10775044" z3="-1.81953338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14387344" y3="-2.52699498" z3="-1.88956883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12622133" y3="-3.5541216" z3="0.61841228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03358323" y3="-5.3669833" z3="-4.74221953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25786971" y3="-5.06964226" z3="-3.7142525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84279588" y3="-4.27858599" z3="-1.1196034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77663779" y3="-4.68900732" z3="-2.86290692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57852856" y3="-5.08339772" z3="-3.26633947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87198919" y3="-4.68032235" z3="-1.9659595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49603619" y3="-4.31056221" z3="-1.54896284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81417356" y3="-4.66982354" z3="-3.20032621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3849902" y3="-5.37927555" z3="-3.93954612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.91121286" y3="-4.65688678" z3="-1.63345296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02068645" y3="-3.79132262" z3="0.18908698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15450946" y3="-3.56525943" z3="0.84061704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0476657" y3="-4.02502254" z3="0.41495891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1412255" y3="-3.42209208" z3="2.30707111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18817397" y3="-3.2287451" z3="5.10474571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33925369" y3="-3.6004716" z3="3.01437114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96635403" y3="-3.15296018" z3="3.024877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98739355" y3="-3.05743619" z3="4.41354426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36223512" y3="-3.50539294" z3="4.40289796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26047606" y3="-3.82338898" z3="2.46903846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00599143" y3="-3.04053748" z3="2.51714322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.05360395" y3="-2.87097668" z3="4.9515393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3024487" y3="-3.65545759" z3="4.94053654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20358312" y3="-3.16207478" z3="6.19619259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43000613" y3="-3.97517585" z3="-0.64612202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20088559" y3="-3.49996951" z3="-1.10335504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.4914812" y3="0.15821592" z3="-4.68903807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06111572" y3="-1.63514365" z3="-0.01360406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.83480186" y3="-0.87247216" z3="1.13157376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.74754725" y3="-0.2469871" z3="1.42213017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.27142641" y3="0.62250584" z3="1.13320172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.29313385" y3="1.4418886" z3="-0.53601156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.06094547" y3="-0.63313702" z3="1.42189571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.30380779" y3="1.89191134" z3="2.511318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.78242234" y3="-0.82576823" z3="2.05749382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.49775528" y3="-0.21019279" z3="3.30367945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.09260284" y3="0.70526091" z3="-1.32925232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.52388348" y3="2.18613187" z3="-0.56456745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.2442163" y3="1.97906549" z3="-0.72329652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02998687" y3="-0.97529743" z3="2.46989852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.04981401" y3="-0.1887868" z3="1.22349176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.95861028" y3="-1.48789619" z3="0.73327723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38400822" y3="1.4090613" z3="3.50111913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.62904844" y3="2.48459092" z3="2.50113204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.14677801" y3="2.59645772" z3="2.39763256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.63774581" y3="-0.6927765" z3="3.79527932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.40160005" y3="-0.34837322" z3="3.91184192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.29286877" y3="0.86614226" z3="3.17139961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87050021" y3="-0.79712788" z3="0.99889455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40932667" y3="-2.1111743" z3="0.84737777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7567535" y3="-2.75589687" z3="1.89059914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.58395115" y3="-2.07473504" z3="3.09225003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.10477478" y3="-0.80125232" z3="3.3015763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.75597235" y3="-0.16943378" z3="2.24682688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48657527" y3="-2.59767254" z3="-0.12698902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33172035" y3="-3.75193343" z3="1.7576969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72055079" y3="-2.66568746" z3="4.11950772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.95272978" y3="-0.30173831" z3="4.25905396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.1276187" y3="0.85145816" z3="2.37280261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84175162" y3="0.35998229" z3="-4.30883806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80504503" y3="-0.61304922" z3="-4.53961668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42295307" y3="-1.79309083" z3="-5.16726679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.11812472" y3="-2.00682167" z3="-5.59791746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83680609" y3="-1.02896735" z3="-5.35126884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.11459184" y3="1.27255491" z3="-3.775038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.84126023" y3="-0.48485976" z3="-4.215007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.41990818" y3="-2.8486607" z3="-5.35631363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.14020475" y3="-2.93891541" z3="-6.10219115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.87175741" y3="-1.19972961" z3="-5.65320814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.42062479" y3="-1.97543692" z3="5.0742293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31343022" y3="-3.79471549" z3="3.94157046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.15165926" y3="-3.75140416" z3="-6.11983024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45535367" y3="-2.76841505" z3="-4.72587458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03736434" y3="1.17043063" z3="-1.46428769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05897881" y3="1.55561514" z3="-2.42672555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39360663" y3="1.54852844" z3="-1.66046466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.77452905" y3="2.26034112" z3="-2.77158368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.13389303" y3="1.25189015" z3="-0.91107382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.82171429" y3="2.54112861" z3="-2.91417869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48911363" y3="2.27542599" z3="-3.57590476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.80947807" y3="2.61805061" z3="-3.7434304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75375507" y3="2.54767211" z3="-4.33671252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11827653" y3="3.16561661" z3="-4.63837097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.29147954" y3="3.09640864" z3="-3.20317617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.15562133" y3="3.50289409" z3="-3.96319632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.06916301" y3="4.10827899" z3="-2.57198987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.76850523" y3="5.4389737" z3="-2.73292151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.91461289" y3="3.8206561" z3="-1.94500439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.38127622" y3="6.19590334" z3="-2.23407934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.87885941" y3="4.88814556" z3="-4.12388887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.6692872" y3="5.83950101" z3="-3.52916352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.01061763" y3="5.18282091" z3="-4.72170707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.44246307" y3="6.90305254" z3="-3.65306433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47758619" y3="-2.08890629" z3="-0.28394777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48719179" y3="-2.90560156" z3="-1.02693253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99278017" y3="-2.43180998" z3="0.62771235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0832215" y3="-1.26711737" z3="-0.71130154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18541185" y3="-1.37273893" z3="-1.21295063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31402218" y3="-0.33448652" z3="-1.57156778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10600457" y3="-1.51512901" z3="-1.03486138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.46142441" y3="-2.03601663" z3="-2.04698798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3487,-.024,-.1814;7.3935,.146,.4206;6.642,.4105,-.3298;4.6888,1.1888,-2.22;4.3809,.3497,-1.1626;2.6875,.7831,-3.6158;3.5699,1.6943,-3.0654;1.2816,2.5203,-4.4959;1.5043,1.1765,-4.3089;.3912,2.8492,-5.0407;2.9227,-.5477,-3.4353;3.1037,-.0796,-.9837;2.4221,-1.2102,-2.0081;.9495,-1.1078,-1.8195;3.1439,-2.527,-1.8896;-.1262,-3.5541,.6184;-.0336,-5.367,-4.7422;-.2579,-5.0696,-3.7143;-.8428,-4.2786,-1.1196;.7766,-4.689,-2.8629;-1.5785,-5.0834,-3.2663;-1.872,-4.6803,-1.966;.496,-4.3106,-1.549;1.8142,-4.6698,-3.2003;-2.385,-5.3793,-3.9395;-2.9112,-4.6569,-1.6335;-1.0207,-3.7913,.1891;-2.1545,-3.5653,.8406;-3.0477,-4.025,.415;-2.1412,-3.4221,2.3071;-2.1882,-3.2287,5.1047;-3.3393,-3.6005,3.0144;-.9664,-3.153,3.0249;-.9874,-3.0574,4.4135;-3.3622,-3.5054,4.4029;-4.2605,-3.8234,2.469;-.006,-3.0405,2.5171;-.0536,-2.871,4.9515;-4.3024,-3.6555,4.9405;-2.2036,-3.1621,6.1962;1.43,-3.9752,-.6461;2.2009,-3.5,-1.1034;.4915,.1582,-4.689;-3.0611,-1.6351,-.0136;-2.8348,-.8725,1.1316;-1.7475,-.247,1.4221;-.2714,.6225,1.1332;-.2931,1.4419,-.536;1.0609,-.6331,1.4219;-.3038,1.8919,2.5113;-3.7824,-.8258,2.0575;-3.4978,-.2102,3.3037;-.0926,.7053,-1.3293;.5239,2.1861,-.5646;-1.2442,1.9791,-.7233;1.03,-.9753,2.4699;2.0498,-.1888,1.2235;.9586,-1.4879,.7333;-.384,1.4091,3.5011;.629,2.4846,2.5011;-1.1468,2.5965,2.3976;-2.6377,-.6928,3.7953;-4.4016,-.3484,3.9118;-3.2929,.8661,3.1714;4.8705,-.7971,.9989;4.4093,-2.1112,.8474;3.7568,-2.7559,1.8906;3.584,-2.0747,3.0923;4.1048,-.8013,3.3016;4.756,-.1694,2.2468;4.4866,-2.5977,-.127;3.3317,-3.7519,1.7577;2.7206,-2.6657,4.1195;3.9527,-.3017,4.2591;5.1276,.8515,2.3728;-.8418,.36,-4.3088;-1.805,-.613,-4.5396;-1.423,-1.7931,-5.1673;-.1181,-2.0068,-5.5979;.8368,-1.029,-5.3513;-1.1146,1.2726,-3.775;-2.8413,-.4849,-4.215;-2.4199,-2.8487,-5.3563;.1402,-2.9389,-6.1022;1.8718,-1.1997,-5.6532;2.4206,-1.9754,5.0742;2.3134,-3.7947,3.9416;-2.1517,-3.7514,-6.1198;-3.4554,-2.7684,-4.7259;7.0374,1.1704,-1.4643;6.059,1.5556,-2.4267;8.3936,1.5485,-1.6605;8.7745,2.2603,-2.7716;9.1339,1.2519,-.9111;9.8217,2.5411,-2.9142;6.4891,2.2754,-3.5759;7.8095,2.6181,-3.7434;5.7538,2.5477,-4.3367;8.1183,3.1656,-4.6384;3.2915,3.0964,-3.2032;2.1556,3.5029,-3.9632;4.0692,4.1083,-2.572;3.7685,5.439,-2.7329;4.9146,3.8207,-1.945;4.3813,6.1959,-2.2341;1.8789,4.8881,-4.1239;2.6693,5.8395,-3.5292;1.0106,5.1828,-4.7217;2.4425,6.9031,-3.6531;-4.4776,-2.0889,-.2839;-4.4872,-2.9056,-1.0269;-4.9928,-2.4318,.6277;-5.0832,-1.2671,-.7113;-2.1854,-1.3727,-1.213;-2.314,-.3345,-1.5716;-1.106,-1.5151,-1.0349;-2.4614,-2.036,-2.047;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650165612948</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005859656371 0.000690473327 0.016835637146 0.005340063952</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030359727 -0.002717115 0.000168045 0.000226890 0.000251784 0.000355026 0.000360505 0.000401821 0.000557763 0.000688277 0.000837405 0.000888280 0.000987726 0.001038050 0.001168470 0.001227913 0.001393096 0.001470269 0.001645411 0.001687936 0.001807087 0.001970236 0.002235584 0.002358125 0.002442170 0.002695277 0.002933167 0.003161983 0.003325296 0.003449855 0.003729503 0.004111423 0.004218634 0.004654527 0.005348186 0.005495040 0.005587614 0.005993188 0.006556547 0.006825153 0.007441301 0.007795532 0.008271862 0.008878314 0.009085448 0.009535728 0.009949388 0.010337165 0.010933031 0.011111475 0.012166191 0.012458578 0.013144080 0.013368457 0.014120796 0.014684419 0.015073574 0.015315118 0.015457209 0.015563493 0.016193960 0.016960284 0.018089631 0.018523079 0.018830420 0.019966028 0.020066854 0.020995119 0.021357598 0.022058525 0.022827283 0.024379001 0.024987716 0.025905097 0.026402367 0.027202654 0.028802656 0.028870854 0.031025361 0.031530583 0.032383883 0.033540802 0.034269047 0.035433095 0.037620523 0.038429384 0.039425979 0.039935131 0.040910435 0.043497890 0.044215464 0.044669407 0.045681233 0.048529688 0.049217940 0.049723600 0.050282510 0.051020403 0.052172560 0.052345142 0.052412212 0.052661495 0.053785008 0.054157488 0.054777112 0.055165598 0.055910190 0.056371039 0.056488442 0.057210494 0.058262824 0.059535264 0.060714477 0.061178435 0.062066050 0.062153478 0.062398425 0.063971302 0.064963221 0.065774306 0.066005488 0.067069831 0.069085090 0.071996757 0.073840592 0.074897339 0.076975383 0.080766527 0.083774123 0.085446420 0.085977076 0.086437786 0.087567216 0.089917032 0.090864473 0.094008345 0.094516815 0.095748054 0.095906807 0.097413356 0.097919241 0.099275782 0.099556809 0.100183962 0.100630515 0.101508930 0.101562517 0.102859689 0.103169256 0.103856149 0.104829157 0.106581224 0.107246468 0.108095993 0.109630818 0.110073777 0.111522596 0.112375362 0.113303994 0.114262125 0.117366899 0.118751895 0.119624377 0.121403133 0.124622617 0.125324215 0.126090106 0.130764543 0.133963411 0.134989951 0.141892492 0.142476885 0.145277720 0.146398399 0.148034069 0.150527145 0.151708048 0.152789904 0.154934505 0.159097647 0.160552852 0.172247112 0.173098708 0.175859379 0.182857136 0.183627394 0.188302222 0.188790745 0.191512507 0.193410132 0.196768590 0.198495277 0.202931006 0.205735012 0.206754486 0.209630240 0.210096528 0.213039503 0.214267014 0.216707517 0.218551000 0.224427629 0.225134360 0.229893806 0.233945716 0.234603707 0.235062234 0.243724391 0.254926758 0.256634274 0.261237381 0.266529118 0.278456805 0.282390775 0.286093543 0.288955752 0.293093259 0.300550178 0.304563445 0.305183036 0.306740107 0.314081293 0.314752391 0.321719630 0.326881171 0.329545361 0.347165056 0.348572402 0.351191130 0.354627303 0.355740674 0.361152101 0.361785581 0.378277970 0.378918543 0.389560301 0.409015379 0.422653889 0.427045684 0.450512723 0.466473864 0.468775434 0.475635285 0.480567156 0.481190328 0.487923844 0.502881041 0.508944145 0.533475995 0.564809266 0.567445226 0.585903323 0.592206981 0.599968620 0.603703935 0.637732102 0.641818749 0.644627464 0.670428288 0.672830370 0.683801927 0.688286802 0.691251899 0.698408021 0.703883774 0.714573825 0.738306497 0.738776751 0.750008251 0.759565169 0.771871922 0.776734937 0.806309389 0.809661760 0.812917833 0.816985567 0.820237587 0.822973657 0.829639617 0.831654144 0.831941857 0.841429617 0.844940945 0.846122426 0.857595481 0.863628202 0.864516203 0.865250632 0.871104466 0.876467420 0.883418879 0.888004775 0.891659275 0.896362923 0.918211870 0.922346755 0.930764206 0.932798556 0.963866381 0.975346685 0.983979941 0.999505883 1.011434917 1.024602108 1.040165790 1.048405044 1.055392656 1.061897662 1.085529931 1.086538622 1.099302199 1.105096898 1.111805701 1.112689860 1.122992468 1.124547694 1.135019261 1.139250995 1.170561999 1.174485388 1.180072426 1.185890284 1.194073304 1.214362962 1.220569105 1.265480732 1.296188257 1.313864658 1.325417929 1.326550809 1.329636077 1.330687268 1.334111999 1.341635973 1.344544621 1.355987995 1.374960778 1.380877097 1.381322685 1.389555133 1.418719597 1.420696236 1.551050438 1.660080796 1.772373542</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">89</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34875867" y3="-0.02658837" z3="-0.1803554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39317126" y3="0.14716418" z3="0.42146654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64120248" y3="0.41077245" z3="-0.32866689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.6860901" y3="1.18736693" z3="-2.21742085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38008905" y3="0.34616112" z3="-1.16108553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68571818" y3="0.77918505" z3="-3.61414561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.56622168" y3="1.69137616" z3="-3.06214772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.27802744" y3="2.51417196" z3="-4.49436483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50285159" y3="1.17099766" z3="-4.30871618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.38737577" y3="2.84234122" z3="-5.03902499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92223978" y3="-0.55111827" z3="-3.43433469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10361733" y3="-0.08540553" z3="-0.98245462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42202111" y3="-1.21507518" z3="-2.00780639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94945375" y3="-1.11225407" z3="-1.81942739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14325052" y3="-2.53211068" z3="-1.88999892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12535817" y3="-3.55127539" z3="0.61497656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03913268" y3="-5.37378312" z3="-4.74323475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.26212945" y3="-5.07512452" z3="-3.71544004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84446219" y3="-4.27649029" z3="-1.12166148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77550735" y3="-4.6973404" z3="-2.86454613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.58553826" y3="-5.08056699" z3="-3.26747159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87731444" y3="-4.67457334" z3="-1.96757188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49613316" y3="-4.31620502" z3="-1.55077631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81514971" y3="-4.68500093" z3="-3.20302902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.39484973" y3="-5.37464685" z3="-3.93998521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.91884004" y3="-4.64307293" z3="-1.63495504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.021224" y3="-3.7861737" z3="0.18623325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1537722" y3="-3.56058023" z3="0.83921161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04836801" y3="-4.01761316" z3="0.41296419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14046191" y3="-3.41735653" z3="2.30525874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18634818" y3="-3.22406904" z3="5.10284059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33901616" y3="-3.59250235" z3="3.012815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96446094" y3="-3.15164484" z3="3.02276377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98501797" y3="-3.05614611" z3="4.41134736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36148607" y3="-3.49742534" z3="4.40131095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26077857" y3="-3.81325761" z3="2.46782026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00361929" y3="-3.04246279" z3="2.51457109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.05040069" y3="-2.87250327" z3="4.94915121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30185099" y3="-3.64518259" z3="4.93935199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20121284" y3="-3.15778625" z3="6.19428849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43160113" y3="-3.98347679" z3="-0.64814808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20008842" y3="-3.50625448" z3="-1.1048389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49264192" y3="0.15219842" z3="-4.69191795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06006491" y3="-1.6261983" z3="-0.01437268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.83029045" y3="-0.86517901" z3="1.13044425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.74165015" y3="-0.24053202" z3="1.41881767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.26215979" y3="0.62642945" z3="1.1316961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.2828584" y3="1.44756351" z3="-0.53670271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.06704806" y3="-0.63363974" z3="1.42436985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.29485995" y3="1.89508284" z3="2.51006717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.77572766" y3="-0.81934233" z3="2.05817707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.4926391" y3="-0.20217162" z3="3.30245221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.08932242" y3="0.7032395" z3="-1.3302359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.53696706" y3="2.18944749" z3="-0.57000669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.23248225" y3="1.97209459" z3="-0.72034191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03177852" y3="-0.97601975" z3="2.47262271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.05858818" y3="-0.19184185" z3="1.22919957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.96453177" y3="-1.48820195" z3="0.73546485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.37963474" y3="1.41154645" z3="3.49936778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.63959405" y3="2.48554295" z3="2.50300697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.13627531" y3="2.60180479" z3="2.39357776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.63181558" y3="-0.67804125" z3="3.79582867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.3938877" y3="-0.34389486" z3="3.91232583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.29484178" y3="0.87212003" z3="3.16571387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87208735" y3="-0.80108491" z3="0.9996952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41075514" y3="-2.11480047" z3="0.84817228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75874152" y3="-2.7598293" z3="1.89156145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.58630825" y3="-2.07933688" z3="3.0931673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.10770182" y3="-0.80644611" z3="3.30258451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.75861197" y3="-0.17437023" z3="2.24786058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48751226" y3="-2.60095304" z3="-0.12607241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33397966" y3="-3.75555878" z3="1.75913464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72263868" y3="-2.67020847" z3="4.12024595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.95620249" y3="-0.30752261" z3="4.26016858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.13038765" y3="0.84615283" z3="2.37374811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84290038" y3="0.34998359" z3="-4.31435644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80524809" y3="-0.62270651" z3="-4.5455616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42112505" y3="-1.80106041" z3="-5.17329692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.11374147" y3="-2.01137339" z3="-5.60376177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83997525" y3="-1.03374253" z3="-5.35398275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.1200527" y3="1.26180662" z3="-3.77741494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83570315" y3="-0.48838398" z3="-4.22450331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.41632668" y3="-2.85746358" z3="-5.36720487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.14529164" y3="-2.9423876" z3="-6.10704904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.87412503" y3="-1.20494915" z3="-5.65438973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.42338441" y3="-1.98010617" z3="5.07550804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31493197" y3="-3.79898478" z3="3.94188955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.14425896" y3="-3.75974828" z3="-6.13002944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45395879" y3="-2.77745617" z3="-4.74050768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03492223" y3="1.17332183" z3="-1.46220171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05550005" y3="1.55758297" z3="-2.42395475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39051149" y3="1.55496514" z3="-1.65812679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.76972443" y3="2.26877116" z3="-2.76845389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1318889" y3="1.25924354" z3="-0.90932765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.81638772" y3="2.5520033" z3="-2.91095819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48392739" y3="2.28000773" z3="-3.57220155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.80356908" y3="2.62549861" z3="-3.7396072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7480185" y3="2.55194862" z3="-4.33253071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1110135" y3="3.17477782" z3="-4.63392549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.28559679" y3="3.09276281" z3="-3.19871839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.14968617" y3="3.49760134" z3="-3.95931042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.05996941" y3="4.10576918" z3="-2.56441688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.75344147" y3="5.43769418" z3="-2.71994421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.9050698" y3="3.8197285" z3="-1.93648208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.36444058" y3="6.1946654" z3="-2.22021899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.86859942" y3="4.88304797" z3="-4.11675035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.65456052" y3="5.83659126" z3="-3.51715294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.00129623" y3="5.17513299" z3="-4.71665142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.42829434" y3="6.89778702" z3="-3.64248019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47657287" y3="-2.07833589" z3="-0.28300673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48671792" y3="-2.89472725" z3="-1.02472402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99150912" y3="-2.41989535" z3="0.62867893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08160022" y3="-1.25659584" z3="-0.71122276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18566151" y3="-1.36738995" z3="-1.21522272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31277776" y3="-0.32972671" z3="-1.57627413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10572132" y3="-1.51127005" z3="-1.03965439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.46407888" y3="-2.03224061" z3="-2.04712253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3488,-.0266,-.1804;7.3932,.1472,.4215;6.6412,.4108,-.3287;4.6861,1.1874,-2.2174;4.3801,.3462,-1.1611;2.6857,.7792,-3.6141;3.5662,1.6914,-3.0621;1.278,2.5142,-4.4944;1.5029,1.171,-4.3087;.3874,2.8423,-5.039;2.9222,-.5511,-3.4343;3.1036,-.0854,-.9825;2.422,-1.2151,-2.0078;.9495,-1.1123,-1.8194;3.1433,-2.5321,-1.89;-.1254,-3.5513,.615;-.0391,-5.3738,-4.7432;-.2621,-5.0751,-3.7154;-.8445,-4.2765,-1.1217;.7755,-4.6973,-2.8645;-1.5855,-5.0806,-3.2675;-1.8773,-4.6746,-1.9676;.4961,-4.3162,-1.5508;1.8151,-4.685,-3.203;-2.3948,-5.3746,-3.94;-2.9188,-4.6431,-1.635;-1.0212,-3.7862,.1862;-2.1538,-3.5606,.8392;-3.0484,-4.0176,.413;-2.1405,-3.4174,2.3053;-2.1863,-3.2241,5.1028;-3.339,-3.5925,3.0128;-.9645,-3.1516,3.0228;-.985,-3.0561,4.4113;-3.3615,-3.4974,4.4013;-4.2608,-3.8133,2.4678;-.0036,-3.0425,2.5146;-.0504,-2.8725,4.9492;-4.3019,-3.6452,4.9394;-2.2012,-3.1578,6.1943;1.4316,-3.9835,-.6481;2.2001,-3.5063,-1.1048;.4926,.1522,-4.6919;-3.0601,-1.6262,-.0144;-2.8303,-.8652,1.1304;-1.7417,-.2405,1.4188;-.2622,.6264,1.1317;-.2829,1.4476,-.5367;1.067,-.6336,1.4244;-.2949,1.8951,2.5101;-3.7757,-.8193,2.0582;-3.4926,-.2022,3.3025;-.0893,.7032,-1.3302;.537,2.1894,-.57;-1.2325,1.9721,-.7203;1.0318,-.976,2.4726;2.0586,-.1918,1.2292;.9645,-1.4882,.7355;-.3796,1.4115,3.4994;.6396,2.4855,2.503;-1.1363,2.6018,2.3936;-2.6318,-.678,3.7958;-4.3939,-.3439,3.9123;-3.2948,.8721,3.1657;4.8721,-.8011,.9997;4.4108,-2.1148,.8482;3.7587,-2.7598,1.8916;3.5863,-2.0793,3.0932;4.1077,-.8064,3.3026;4.7586,-.1744,2.2479;4.4875,-2.601,-.1261;3.334,-3.7556,1.7591;2.7226,-2.6702,4.1202;3.9562,-.3075,4.2602;5.1304,.8462,2.3737;-.8429,.35,-4.3144;-1.8052,-.6227,-4.5456;-1.4211,-1.8011,-5.1733;-.1137,-2.0114,-5.6038;.84,-1.0337,-5.354;-1.1201,1.2618,-3.7774;-2.8357,-.4884,-4.2245;-2.4163,-2.8575,-5.3672;.1453,-2.9424,-6.107;1.8741,-1.2049,-5.6544;2.4234,-1.9801,5.0755;2.3149,-3.799,3.9419;-2.1443,-3.7597,-6.13;-3.454,-2.7775,-4.7405;7.0349,1.1733,-1.4622;6.0555,1.5576,-2.424;8.3905,1.555,-1.6581;8.7697,2.2688,-2.7685;9.1319,1.2592,-.9093;9.8164,2.552,-2.911;6.4839,2.28,-3.5722;7.8036,2.6255,-3.7396;5.748,2.5519,-4.3325;8.111,3.1748,-4.6339;3.2856,3.0928,-3.1987;2.1497,3.4976,-3.9593;4.06,4.1058,-2.5644;3.7534,5.4377,-2.7199;4.9051,3.8197,-1.9365;4.3644,6.1947,-2.2202;1.8686,4.883,-4.1168;2.6546,5.8366,-3.5172;1.0013,5.1751,-4.7167;2.4283,6.8978,-3.6425;-4.4766,-2.0783,-.283;-4.4867,-2.8947,-1.0247;-4.9915,-2.4199,.6287;-5.0816,-1.2566,-.7112;-2.1857,-1.3674,-1.2152;-2.3128,-.3297,-1.5763;-1.1057,-1.5113,-1.0397;-2.4641,-2.0322,-2.0471;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650143952504</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006437034010 0.000693986082 0.020194483543 0.005339710523</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030376287 -0.002786096 0.000164025 0.000222418 0.000254270 0.000354220 0.000360427 0.000401765 0.000555712 0.000688253 0.000840456 0.000888856 0.000986293 0.001042415 0.001170940 0.001227484 0.001387825 0.001500429 0.001643232 0.001687881 0.001805736 0.001990904 0.002235611 0.002381713 0.002456926 0.002688730 0.002965751 0.003190484 0.003326765 0.003452043 0.003747416 0.004159172 0.004218609 0.004661192 0.005364673 0.005495030 0.005587577 0.005993263 0.006556478 0.006825037 0.007452158 0.007800172 0.008328470 0.008881866 0.009098590 0.009535848 0.009949258 0.010392400 0.010947729 0.011115969 0.012172313 0.012478887 0.013179298 0.013368740 0.014158740 0.014696917 0.015075916 0.015318960 0.015551012 0.015679499 0.016209193 0.016964970 0.018117685 0.018533461 0.018830212 0.019968341 0.020316049 0.020995087 0.021369666 0.022068831 0.022830009 0.024380968 0.024999390 0.025909283 0.026418137 0.027208823 0.028805052 0.028870784 0.031032978 0.031531252 0.032483792 0.033540858 0.034290560 0.035434113 0.037622492 0.038429830 0.039470204 0.039983008 0.040947284 0.043515216 0.044225102 0.044689504 0.045694294 0.048530220 0.049239722 0.049766171 0.050318110 0.051020438 0.052171754 0.052348408 0.052419296 0.052662031 0.053787072 0.054167562 0.054800182 0.055165013 0.055918204 0.056370729 0.056489676 0.057210642 0.058289885 0.059535972 0.060726226 0.061185126 0.062064465 0.062151999 0.062444885 0.064043192 0.064964387 0.065773751 0.066026654 0.067100150 0.069384906 0.072017151 0.073839572 0.074911057 0.076979220 0.080787778 0.083772423 0.085469464 0.085977009 0.086455873 0.087569356 0.089921618 0.090916685 0.094008887 0.094518836 0.095812699 0.095917249 0.097413521 0.097939243 0.099275709 0.099613588 0.100284960 0.100893186 0.101509257 0.101601169 0.102881538 0.103169355 0.103856238 0.104835080 0.106600899 0.107284699 0.108237132 0.109684310 0.110308575 0.111880346 0.112469374 0.113436308 0.114299292 0.117379300 0.118820633 0.119657809 0.121413414 0.124744228 0.125492231 0.126103538 0.130800635 0.133977703 0.135074655 0.141887536 0.142496482 0.145291796 0.146427456 0.148039537 0.150528076 0.151959922 0.152792386 0.154975049 0.159265281 0.160579917 0.172263313 0.173114203 0.175884299 0.182873622 0.183636431 0.188386210 0.188813972 0.191522671 0.193421904 0.196801642 0.198595524 0.202928589 0.205861721 0.206754669 0.209630265 0.210126549 0.213052505 0.214394306 0.216716693 0.218552652 0.224427979 0.225152621 0.229893657 0.234072143 0.234606938 0.235083323 0.243736233 0.254955928 0.256643858 0.261294619 0.266592474 0.278459097 0.282436127 0.286093670 0.288967622 0.293158320 0.300557545 0.304577630 0.305191736 0.306738898 0.314085446 0.314752374 0.321719928 0.326887378 0.329548320 0.347477890 0.348609775 0.351211396 0.354628457 0.355766582 0.361151359 0.361785789 0.378345359 0.379067557 0.389560206 0.409022371 0.422654666 0.427466911 0.450518683 0.466480472 0.468815939 0.475635575 0.480567996 0.481285394 0.488005584 0.502902827 0.508944904 0.533479134 0.564826230 0.567492755 0.585928573 0.592210980 0.600081094 0.603721190 0.637871423 0.641820920 0.644666158 0.670508124 0.672934347 0.683835538 0.688479723 0.691258278 0.698426635 0.703884103 0.714592147 0.738774961 0.739440326 0.750045748 0.759570817 0.771877953 0.776747976 0.806309045 0.809707476 0.812923062 0.817278715 0.820251656 0.823292538 0.829639597 0.831763600 0.831963208 0.841481516 0.844940976 0.846158007 0.857595738 0.863709782 0.864625997 0.868495415 0.871153816 0.877157555 0.883418820 0.888008316 0.891659610 0.896393722 0.918245417 0.922346829 0.930794410 0.932812600 0.963866466 0.975349563 0.983981124 0.999510425 1.011459243 1.024607809 1.040188574 1.048431161 1.055404934 1.062046957 1.085559922 1.086539980 1.099738074 1.105143507 1.111820798 1.112739974 1.123055008 1.125250355 1.135021194 1.139252519 1.170563510 1.174492356 1.180073929 1.185890691 1.194073455 1.214390450 1.220570097 1.265481711 1.296223390 1.313887468 1.325574588 1.326623406 1.329655130 1.330689514 1.334288719 1.341635930 1.344546058 1.356198040 1.374960838 1.380877893 1.381328286 1.389562169 1.418728026 1.420713243 1.551056949 1.660081453 1.772374629</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">90</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34822771" y3="-0.02722595" z3="-0.17923513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39205041" y3="0.14921963" z3="0.4227466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63974812" y3="0.41258185" z3="-0.32705898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68333353" y3="1.18705324" z3="-2.21525267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37898165" y3="0.34456587" z3="-1.15972724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68409809" y3="0.77604654" z3="-3.61294403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.56245354" y3="1.68955979" z3="-3.0596394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.27320521" y3="2.50977879" z3="-4.49205345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5007991" y3="1.16635113" z3="-4.30776595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.38283446" y3="2.83654338" z3="-5.03800735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92311379" y3="-0.55404184" z3="-3.43356904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10339971" y3="-0.08956792" z3="-0.98147203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42254648" y3="-1.21897864" z3="-2.00753374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94996308" y3="-1.11597434" z3="-1.81906996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14370915" y3="-2.53617078" z3="-1.89072351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12666679" y3="-3.54858725" z3="0.61193906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.04545281" y3="-5.38135347" z3="-4.74256276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.26784077" y3="-5.07916834" z3="-3.71545072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84764312" y3="-4.27522826" z3="-1.12325969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7709727" y3="-4.7050427" z3="-2.86470748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.59067896" y3="-5.0793525" z3="-3.26818711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.88119083" y3="-4.67046111" z3="-1.96890472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49185943" y3="-4.31858166" z3="-1.55221665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8103339" y3="-4.69744903" z3="-3.20229461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.4018692" y3="-5.36899329" z3="-3.94072386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.92104326" y3="-4.63775218" z3="-1.63687433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02258394" y3="-3.78360298" z3="0.18423549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15519071" y3="-3.5541741" z3="0.83702181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04940454" y3="-4.01230434" z3="0.4125656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14011911" y3="-3.41161766" z3="2.3036499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18453697" y3="-3.2184638" z3="5.10145131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33924829" y3="-3.58192055" z3="3.01157883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96230746" y3="-3.15206103" z3="3.02114692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98218443" y3="-3.05652769" z3="4.40981752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36107985" y3="-3.48675075" z3="4.40009779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26236051" y3="-3.79860187" z3="2.46677226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00051397" y3="-3.04808976" z3="2.51330034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.04639526" y3="-2.87746913" z3="4.94754271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30235768" y3="-3.63008865" z3="4.93819856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.19923129" y3="-3.15166439" z3="6.19283889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42761561" y3="-3.98602813" z3="-0.65048886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20032668" y3="-3.51294089" z3="-1.10826237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49193212" y3="0.14689485" z3="-4.69117797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05801085" y3="-1.6221213" z3="-0.01559021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.82920213" y3="-0.85970147" z3="1.12823701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.73814531" y3="-0.2393091" z3="1.41694002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.25766841" y3="0.62497145" z3="1.13331517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.27217347" y3="1.44382639" z3="-0.53661205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.06926098" y3="-0.6365407" z3="1.42701827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.28744869" y3="1.89479024" z3="2.51150461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.77672176" y3="-0.80795593" z3="2.05387061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.48651656" y3="-0.19295063" z3="3.30066078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.08054638" y3="0.70231342" z3="-1.32858765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.5556489" y3="2.1792298" z3="-0.56979724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.21854755" y3="1.99228907" z3="-0.72397917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03199729" y3="-0.9810843" z3="2.47425425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.06088948" y3="-0.19501624" z3="1.23540599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.96738139" y3="-1.48939062" z3="0.73576539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.37382594" y3="1.41124305" z3="3.5004518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.64887679" y3="2.48245078" z3="2.50526847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.12636355" y3="2.60387594" z3="2.39572202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.62202273" y3="-0.67662956" z3="3.78728996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.38734482" y3="-0.33102732" z3="3.9147353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.28292614" y3="0.88275333" z3="3.16684979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87293345" y3="-0.80346037" z3="1.00025403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4105983" y3="-2.11696444" z3="0.84714115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75954432" y3="-2.76310856" z3="1.89049386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.58920584" y3="-2.0840535" z3="3.0937781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.11187426" y3="-0.81168779" z3="3.30471433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.7617968" y3="-0.1785345" z3="2.249954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4853395" y3="-2.60182506" z3="-0.12838473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33368397" y3="-3.75858964" z3="1.75674927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72599297" y3="-2.67544047" z3="4.12097415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.96199227" y3="-0.31394005" z3="4.26350037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.1343438" y3="0.84176666" z3="2.3770643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84314204" y3="0.34385334" z3="-4.31421535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80359998" y3="-0.63138958" z3="-4.55203504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4165848" y3="-1.80844468" z3="-5.18233029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.10930545" y3="-2.01784773" z3="-5.60835687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.84240597" y3="-1.0377061" z3="-5.35440339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.12124837" y3="1.25420074" z3="-3.77788791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.84029534" y3="-0.5053152" z3="-4.23109628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.41094013" y3="-2.86573111" z3="-5.37988068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.1528455" y3="-2.94793007" z3="-6.11385543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.87902367" y3="-1.20466309" z3="-5.65422356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.42689259" y3="-1.98593907" z3="5.07650756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31819938" y3="-3.80396364" z3="3.94218715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.13476132" y3="-3.76780151" z3="-6.14196043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45206947" y3="-2.78746392" z3="-4.75836285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03197758" y3="1.17681542" z3="-1.45975399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05186273" y3="1.56002218" z3="-2.42122684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.38665834" y3="1.5614491" z3="-1.65507619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.76445614" y3="2.27748476" z3="-2.76454077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.12858451" y3="1.267205" z3="-0.90627197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.81049801" y3="2.56330535" z3="-2.90655711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4787781" y3="2.28458737" z3="-3.56857872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.79770351" y3="2.63316408" z3="-3.73544282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.74237156" y3="2.5560349" z3="-4.32860135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10402547" y3="3.18435784" z3="-4.62905507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.27807435" y3="3.09105518" z3="-3.19372047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.14191023" y3="3.4947311" z3="-3.95465729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.05038302" y3="4.10416772" z3="-2.55871017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.74405106" y3="5.43339572" z3="-2.71651938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.89604602" y3="3.8187012" z3="-1.93095646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.35273028" y3="6.19106528" z3="-2.21478657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.85888562" y3="4.87911307" z3="-4.11151356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.64415417" y3="5.83170838" z3="-3.51308636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.99080642" y3="5.17112514" z3="-4.71069804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.41161963" y3="6.89483656" z3="-3.63333211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47533941" y3="-2.07047414" z3="-0.28503205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48818031" y3="-2.88815829" z3="-1.02626115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99118171" y3="-2.40965649" z3="0.6273054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07818821" y3="-1.24712132" z3="-0.71353183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18348453" y3="-1.36262622" z3="-1.21532169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30970444" y3="-0.32406201" z3="-1.57586914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10493265" y3="-1.50755236" z3="-1.03746895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.46082314" y3="-2.02640511" z3="-2.04756316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3482,-.0272,-.1792;7.3921,.1492,.4227;6.6397,.4126,-.3271;4.6833,1.1871,-2.2153;4.379,.3446,-1.1597;2.6841,.776,-3.6129;3.5625,1.6896,-3.0596;1.2732,2.5098,-4.4921;1.5008,1.1664,-4.3078;.3828,2.8365,-5.038;2.9231,-.554,-3.4336;3.1034,-.0896,-.9815;2.4225,-1.219,-2.0075;.95,-1.116,-1.8191;3.1437,-2.5362,-1.8907;-.1267,-3.5486,.6119;-.0455,-5.3814,-4.7426;-.2678,-5.0792,-3.7155;-.8476,-4.2752,-1.1233;.771,-4.705,-2.8647;-1.5907,-5.0794,-3.2682;-1.8812,-4.6705,-1.9689;.4919,-4.3186,-1.5522;1.8103,-4.6974,-3.2023;-2.4019,-5.369,-3.9407;-2.921,-4.6378,-1.6369;-1.0226,-3.7836,.1842;-2.1552,-3.5542,.837;-3.0494,-4.0123,.4126;-2.1401,-3.4116,2.3036;-2.1845,-3.2185,5.1015;-3.3392,-3.5819,3.0116;-.9623,-3.1521,3.0211;-.9822,-3.0565,4.4098;-3.3611,-3.4868,4.4001;-4.2624,-3.7986,2.4668;-.0005,-3.0481,2.5133;-.0464,-2.8775,4.9475;-4.3024,-3.6301,4.9382;-2.1992,-3.1517,6.1928;1.4276,-3.986,-.6505;2.2003,-3.5129,-1.1083;.4919,.1469,-4.6912;-3.058,-1.6221,-.0156;-2.8292,-.8597,1.1282;-1.7381,-.2393,1.4169;-.2577,.625,1.1333;-.2722,1.4438,-.5366;1.0693,-.6365,1.427;-.2874,1.8948,2.5115;-3.7767,-.808,2.0539;-3.4865,-.193,3.3007;-.0805,.7023,-1.3286;.5556,2.1792,-.5698;-1.2185,1.9923,-.724;1.032,-.9811,2.4743;2.0609,-.195,1.2354;.9674,-1.4894,.7358;-.3738,1.4112,3.5005;.6489,2.4825,2.5053;-1.1264,2.6039,2.3957;-2.622,-.6766,3.7873;-4.3873,-.331,3.9147;-3.2829,.8828,3.1668;4.8729,-.8035,1.0003;4.4106,-2.117,.8471;3.7595,-2.7631,1.8905;3.5892,-2.0841,3.0938;4.1119,-.8117,3.3047;4.7618,-.1785,2.25;4.4853,-2.6018,-.1284;3.3337,-3.7586,1.7567;2.726,-2.6754,4.121;3.962,-.3139,4.2635;5.1343,.8418,2.3771;-.8431,.3439,-4.3142;-1.8036,-.6314,-4.552;-1.4166,-1.8084,-5.1823;-.1093,-2.0178,-5.6084;.8424,-1.0377,-5.3544;-1.1212,1.2542,-3.7779;-2.8403,-.5053,-4.2311;-2.4109,-2.8657,-5.3799;.1528,-2.9479,-6.1139;1.879,-1.2047,-5.6542;2.4269,-1.9859,5.0765;2.3182,-3.804,3.9422;-2.1348,-3.7678,-6.142;-3.4521,-2.7875,-4.7584;7.032,1.1768,-1.4598;6.0519,1.56,-2.4212;8.3867,1.5614,-1.6551;8.7645,2.2775,-2.7645;9.1286,1.2672,-.9063;9.8105,2.5633,-2.9066;6.4788,2.2846,-3.5686;7.7977,2.6332,-3.7354;5.7424,2.556,-4.3286;8.104,3.1844,-4.6291;3.2781,3.0911,-3.1937;2.1419,3.4947,-3.9547;4.0504,4.1042,-2.5587;3.7441,5.4334,-2.7165;4.896,3.8187,-1.931;4.3527,6.1911,-2.2148;1.8589,4.8791,-4.1115;2.6442,5.8317,-3.5131;.9908,5.1711,-4.7107;2.4116,6.8948,-3.6333;-4.4753,-2.0705,-.285;-4.4882,-2.8882,-1.0263;-4.9912,-2.4097,.6273;-5.0782,-1.2471,-.7135;-2.1835,-1.3626,-1.2153;-2.3097,-.3241,-1.5759;-1.1049,-1.5076,-1.0375;-2.4608,-2.0264,-2.0476;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650120117196</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005473441431 0.000738156496 0.015731912290 0.005338105489</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030381627 -0.003164248 0.000142479 0.000234300 0.000252917 0.000353502 0.000361619 0.000403564 0.000556017 0.000688419 0.000855224 0.000890259 0.000992436 0.001042249 0.001176309 0.001231964 0.001439939 0.001501355 0.001667982 0.001692088 0.001811149 0.001987897 0.002237338 0.002388297 0.002457259 0.002757533 0.002988816 0.003195882 0.003368595 0.003486234 0.003770148 0.004153995 0.004219877 0.004660234 0.005388292 0.005495374 0.005588015 0.005993270 0.006562826 0.006825229 0.007454524 0.007800034 0.008401749 0.008881703 0.009110131 0.009535875 0.009952517 0.010521996 0.010953091 0.011142977 0.012172375 0.012478621 0.013205914 0.013376153 0.014222767 0.014725848 0.015076711 0.015321922 0.015558887 0.015892779 0.016244560 0.017012040 0.018147760 0.018532072 0.018840382 0.019968479 0.020521081 0.020995371 0.021393935 0.022080269 0.022832125 0.024395596 0.025029965 0.025915419 0.026433442 0.027227531 0.028807615 0.028870681 0.031034613 0.031531525 0.032629937 0.033542335 0.034387390 0.035446658 0.037622274 0.038433076 0.039467439 0.040037951 0.040962374 0.043537804 0.044255813 0.044690673 0.045724605 0.048537368 0.049257360 0.049811132 0.050435325 0.051028266 0.052180676 0.052352227 0.052435686 0.052662139 0.053796947 0.054167408 0.054815127 0.055168859 0.055931727 0.056370617 0.056489203 0.057212346 0.058348139 0.059540488 0.060735338 0.061193208 0.062064374 0.062171607 0.062577590 0.064063975 0.064964497 0.065778471 0.066031028 0.067104676 0.069570529 0.072019545 0.073847757 0.074925906 0.076997332 0.080838894 0.083777495 0.085467171 0.086010039 0.086458371 0.087568818 0.089924881 0.090971934 0.094009498 0.094520544 0.095836541 0.095936280 0.097421116 0.097951346 0.099275759 0.099618936 0.100299023 0.101177036 0.101510246 0.101770413 0.102908377 0.103173500 0.103856900 0.104840771 0.106614316 0.107367976 0.108385387 0.109718303 0.110486018 0.112070678 0.112715418 0.113805980 0.114439463 0.117425052 0.118903049 0.119691871 0.121412460 0.124750145 0.125493915 0.126101882 0.130818472 0.133992768 0.135066347 0.141918860 0.142495163 0.145290683 0.146468570 0.148061747 0.150536405 0.152134787 0.152847787 0.155023237 0.159451647 0.160622848 0.172278329 0.173113413 0.175912111 0.182881505 0.183667494 0.188449615 0.188809522 0.191559019 0.193419974 0.196811208 0.198588263 0.202961706 0.205851778 0.206754685 0.209630290 0.210130823 0.213053945 0.214445676 0.216717071 0.218560502 0.224429446 0.225169911 0.229902367 0.234101956 0.234606770 0.235093735 0.243755104 0.254973360 0.256643184 0.261326311 0.266612426 0.278459084 0.282446896 0.286093908 0.288974921 0.293226980 0.300559824 0.304591832 0.305209970 0.306777038 0.314086062 0.314752486 0.321722881 0.326893823 0.329550282 0.347928667 0.348648894 0.351218632 0.354629188 0.355772526 0.361183210 0.361785999 0.378397673 0.379490421 0.389562159 0.409028194 0.422658028 0.427943418 0.450519749 0.466510480 0.468836006 0.475635671 0.480598827 0.481342683 0.488182519 0.502938123 0.508946963 0.533487871 0.564853007 0.567549288 0.585949479 0.592214417 0.600440412 0.603736647 0.637939451 0.641840359 0.644737610 0.670614104 0.673093766 0.683870792 0.689125048 0.691260658 0.698433580 0.703884108 0.714611826 0.738775588 0.740429888 0.750110852 0.759585305 0.771882086 0.776774091 0.806336935 0.809757603 0.812925620 0.817504568 0.820266570 0.823466913 0.829639611 0.831808461 0.831971709 0.841483790 0.844953429 0.846199636 0.857595829 0.863792698 0.864642119 0.870977059 0.871805302 0.878444975 0.883435198 0.888100644 0.891661127 0.896394627 0.918253698 0.922351747 0.930849940 0.932816097 0.963869174 0.975358055 0.983982723 0.999521933 1.011534451 1.024609519 1.040204253 1.048430928 1.055406713 1.062150547 1.085581985 1.086539977 1.099987872 1.105145519 1.111821001 1.112744603 1.123084228 1.126254156 1.135022942 1.139253739 1.170564416 1.174522788 1.180084567 1.185891239 1.194073937 1.214419134 1.220575475 1.265484394 1.296268482 1.313921837 1.325783648 1.326622408 1.329671272 1.330704953 1.334357204 1.341636842 1.344565191 1.356312814 1.374963401 1.380878112 1.381333013 1.389562602 1.418738527 1.420853711 1.551063205 1.660081581 1.772383308</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">91</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34741591" y3="-0.02864881" z3="-0.1781705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39078958" y3="0.15253359" z3="0.42496291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63804766" y3="0.41465997" z3="-0.3249412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68057239" y3="1.18647225" z3="-2.2132256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37762393" y3="0.3419813" z3="-1.15865457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68245996" y3="0.77339696" z3="-3.61150853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.5593291" y3="1.68757752" z3="-3.05779258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.26926192" y3="2.50493557" z3="-4.4903249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.49889654" y3="1.16231079" z3="-4.30634059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.37829966" y3="2.83082894" z3="-5.03595729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92361245" y3="-0.5565581" z3="-3.43328669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10286731" y3="-0.09440959" z3="-0.98070102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.422376" y3="-1.22275872" z3="-2.00818765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94964693" y3="-1.11995174" z3="-1.8204841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14280027" y3="-2.54031119" z3="-1.89172486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12931966" y3="-3.54796238" z3="0.60963282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.05248229" y3="-5.3821819" z3="-4.74315527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.27377143" y3="-5.08021325" z3="-3.71620121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85201261" y3="-4.27498568" z3="-1.12441396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76318748" y3="-4.70219269" z3="-2.86678438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.59419824" y3="-5.08372043" z3="-3.26757702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.88419162" y3="-4.67363015" z3="-1.96873512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48659844" y3="-4.3182962" z3="-1.5539616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80047236" y3="-4.69147512" z3="-3.20484384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.40202476" y3="-5.37880933" z3="-3.9390658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.92385279" y3="-4.64039503" z3="-1.63562395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02603429" y3="-3.7818801" z3="0.18260641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15717342" y3="-3.55058948" z3="0.83636602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05388342" y3="-4.00558623" z3="0.41213333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1410416" y3="-3.4068834" z3="2.3026464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18356598" y3="-3.21184366" z3="5.10033246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33997028" y3="-3.57304118" z3="3.01137287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96301593" y3="-3.1499453" z3="3.01916659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98195642" y3="-3.0534397" z3="4.40779298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36081038" y3="-3.4770367" z3="4.39982511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26370552" y3="-3.78689294" z3="2.46714597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0020526" y3="-3.04866008" z3="2.51059768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.04602218" y3="-2.87665859" z3="4.94491096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30180373" y3="-3.6172746" z3="4.93847682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.19735085" y3="-3.14435776" z3="6.19173734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42347479" y3="-3.98747499" z3="-0.65219107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19424434" y3="-3.51406126" z3="-1.10899595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49323015" y3="0.13943432" z3="-4.6948397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05606388" y3="-1.61508328" z3="-0.01715056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.82241037" y3="-0.85268962" z3="1.12696386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.7299841" y3="-0.2341126" z3="1.41410183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.24689599" y3="0.62704677" z3="1.13348572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.25869175" y3="1.45001572" z3="-0.53434492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.07457516" y3="-0.64025576" z3="1.42821841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.27680308" y3="1.89299707" z3="2.51429815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.76820945" y3="-0.79909294" z3="2.05451827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.48019065" y3="-0.18352645" z3="3.29861245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.07243238" y3="0.70521426" z3="-1.32818679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.56557547" y3="2.18395209" z3="-0.56603429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.20291598" y3="1.98257964" z3="-0.71796931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03294775" y3="-0.98745372" z3="2.47472906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.06842178" y3="-0.20118679" z3="1.24004967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.97140994" y3="-1.49136932" z3="0.73496004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.36538385" y3="1.40810709" z3="3.50247156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.6600376" y3="2.47895848" z3="2.51044801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.11409072" y3="2.60399912" z3="2.3984738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.6219662" y3="-0.66733205" z3="3.79024048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.38290021" y3="-0.31853813" z3="3.90795108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.27275961" y3="0.89119912" z3="3.16379808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87372198" y3="-0.80656958" z3="1.00072617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4105729" y3="-2.11952249" z3="0.84612562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76053677" y3="-2.76708974" z3="1.88919249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59199066" y3="-2.08997628" z3="3.09360724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.11585729" y3="-0.81839556" z3="3.30602831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.76467286" y3="-0.18374171" z3="2.251477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48398941" y3="-2.602945" z3="-0.12994745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33376677" y3="-3.76195272" z3="1.75416531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72921413" y3="-2.68232983" z3="4.12062521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.96753254" y3="-0.32220158" z3="4.26574969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.13805664" y3="0.83608065" z3="2.3799165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84401594" y3="0.33228533" z3="-4.32035014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80315965" y3="-0.64171906" z3="-4.5580556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4138687" y3="-1.81709901" z3="-5.18878027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.10432495" y3="-2.02294489" z3="-5.61439421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.84612251" y3="-1.04383495" z3="-5.35980703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.12382702" y3="1.24154049" z3="-3.78164412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83597472" y3="-0.51232899" z3="-4.2399716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.40636866" y3="-2.87456695" z3="-5.39065686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.15930593" y3="-2.9519953" z3="-6.12007427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8814938" y3="-1.21168251" z3="-5.65669653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.43209086" y3="-1.99400667" z3="5.07795548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31964304" y3="-3.81017288" z3="3.93992818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.12781326" y3="-3.77646519" z3="-6.15112235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44860711" y3="-2.79528037" z3="-4.77211226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02898497" y3="1.1810228" z3="-1.45667394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04845574" y3="1.56293306" z3="-2.4181915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.38285125" y3="1.5687232" z3="-1.65101798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.75954126" y3="2.28667674" z3="-2.75955817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.12483308" y3="1.27466008" z3="-0.90229757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.80493973" y3="2.57455871" z3="-2.90088457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47429913" y3="2.28955171" z3="-3.56462969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.79248741" y3="2.64135729" z3="-3.73049068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7376146" y3="2.55980428" z3="-4.32480225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09793386" y3="3.19399052" z3="-4.62341476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.27372944" y3="3.08769709" z3="-3.19282543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.13649165" y3="3.49015192" z3="-3.95306961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.04334242" y3="4.10227052" z3="-2.55595724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.72978067" y3="5.4339485" z3="-2.7072235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.88957964" y3="3.8179301" z3="-1.92850869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.33699837" y3="6.19214736" z3="-2.20504783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.84890165" y3="4.87501417" z3="-4.10721271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.62927211" y3="5.83082575" z3="-3.50359424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.98044297" y3="5.16547645" z3="-4.70659521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.39842778" y3="6.89116383" z3="-3.62641461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47522967" y3="-2.06029486" z3="-0.28563877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.49010697" y3="-2.87980448" z3="-1.02503766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99311167" y3="-2.39581989" z3="0.6270649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07472477" y3="-1.23603641" z3="-0.71688146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18021761" y3="-1.35947748" z3="-1.21754464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30421533" y3="-0.32129196" z3="-1.57866054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10098004" y3="-1.5072849" z3="-1.04083929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.46050309" y3="-2.02374645" z3="-2.04962843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3474,-.0286,-.1782;7.3908,.1525,.425;6.638,.4147,-.3249;4.6806,1.1865,-2.2132;4.3776,.342,-1.1587;2.6825,.7734,-3.6115;3.5593,1.6876,-3.0578;1.2693,2.5049,-4.4903;1.4989,1.1623,-4.3063;.3783,2.8308,-5.036;2.9236,-.5566,-3.4333;3.1029,-.0944,-.9807;2.4224,-1.2228,-2.0082;.9496,-1.12,-1.8205;3.1428,-2.5403,-1.8917;-.1293,-3.548,.6096;-.0525,-5.3822,-4.7432;-.2738,-5.0802,-3.7162;-.852,-4.275,-1.1244;.7632,-4.7022,-2.8668;-1.5942,-5.0837,-3.2676;-1.8842,-4.6736,-1.9687;.4866,-4.3183,-1.554;1.8005,-4.6915,-3.2048;-2.402,-5.3788,-3.9391;-2.9239,-4.6404,-1.6356;-1.026,-3.7819,.1826;-2.1572,-3.5506,.8364;-3.0539,-4.0056,.4121;-2.141,-3.4069,2.3026;-2.1836,-3.2118,5.1003;-3.34,-3.573,3.0114;-.963,-3.1499,3.0192;-.982,-3.0534,4.4078;-3.3608,-3.477,4.3998;-4.2637,-3.7869,2.4671;-.0021,-3.0487,2.5106;-.046,-2.8767,4.9449;-4.3018,-3.6173,4.9385;-2.1974,-3.1444,6.1917;1.4235,-3.9875,-.6522;2.1942,-3.5141,-1.109;.4932,.1394,-4.6948;-3.0561,-1.6151,-.0172;-2.8224,-.8527,1.127;-1.73,-.2341,1.4141;-.2469,.627,1.1335;-.2587,1.45,-.5343;1.0746,-.6403,1.4282;-.2768,1.893,2.5143;-3.7682,-.7991,2.0545;-3.4802,-.1835,3.2986;-.0724,.7052,-1.3282;.5656,2.184,-.566;-1.2029,1.9826,-.718;1.0329,-.9875,2.4747;2.0684,-.2012,1.24;.9714,-1.4914,.735;-.3654,1.4081,3.5025;.66,2.479,2.5104;-1.1141,2.604,2.3985;-2.622,-.6673,3.7902;-4.3829,-.3185,3.908;-3.2728,.8912,3.1638;4.8737,-.8066,1.0007;4.4106,-2.1195,.8461;3.7605,-2.7671,1.8892;3.592,-2.09,3.0936;4.1159,-.8184,3.306;4.7647,-.1837,2.2515;4.484,-2.6029,-.1299;3.3338,-3.762,1.7542;2.7292,-2.6823,4.1206;3.9675,-.3222,4.2657;5.1381,.8361,2.3799;-.844,.3323,-4.3204;-1.8032,-.6417,-4.5581;-1.4139,-1.8171,-5.1888;-.1043,-2.0229,-5.6144;.8461,-1.0438,-5.3598;-1.1238,1.2415,-3.7816;-2.836,-.5123,-4.24;-2.4064,-2.8746,-5.3907;.1593,-2.952,-6.1201;1.8815,-1.2117,-5.6567;2.4321,-1.994,5.078;2.3196,-3.8102,3.9399;-2.1278,-3.7765,-6.1511;-3.4486,-2.7953,-4.7721;7.029,1.181,-1.4567;6.0485,1.5629,-2.4182;8.3829,1.5687,-1.651;8.7595,2.2867,-2.7596;9.1248,1.2747,-.9023;9.8049,2.5746,-2.9009;6.4743,2.2896,-3.5646;7.7925,2.6414,-3.7305;5.7376,2.5598,-4.3248;8.0979,3.194,-4.6234;3.2737,3.0877,-3.1928;2.1365,3.4902,-3.9531;4.0433,4.1023,-2.556;3.7298,5.4339,-2.7072;4.8896,3.8179,-1.9285;4.337,6.1921,-2.205;1.8489,4.875,-4.1072;2.6293,5.8308,-3.5036;.9804,5.1655,-4.7066;2.3984,6.8912,-3.6264;-4.4752,-2.0603,-.2856;-4.4901,-2.8798,-1.025;-4.9931,-2.3958,.6271;-5.0747,-1.236,-.7169;-2.1802,-1.3595,-1.2175;-2.3042,-.3213,-1.5787;-1.101,-1.5073,-1.0408;-2.4605,-2.0237,-2.0496;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650093993439</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005990599534 0.000774700526 0.018797680966 0.005336803215</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030381358 -0.003274771 0.000139213 0.000222007 0.000253571 0.000353362 0.000361581 0.000410674 0.000562797 0.000688761 0.000866611 0.000894462 0.001004455 0.001043491 0.001180653 0.001234182 0.001476333 0.001511618 0.001682219 0.001696663 0.001818289 0.002001133 0.002241900 0.002432463 0.002461238 0.002863790 0.003006083 0.003199788 0.003396331 0.003531838 0.003967128 0.004202000 0.004266664 0.004660996 0.005391483 0.005504647 0.005596130 0.005994170 0.006566594 0.006825178 0.007454370 0.007801356 0.008433874 0.008882403 0.009111714 0.009539462 0.009960662 0.010702915 0.010965306 0.011154644 0.012175169 0.012502673 0.013204081 0.013374648 0.014263057 0.014747750 0.015079125 0.015326066 0.015561049 0.015955296 0.016261121 0.017025511 0.018144932 0.018539950 0.018894525 0.019968344 0.020647330 0.020998582 0.021405661 0.022087445 0.022832181 0.024425641 0.025055392 0.025919331 0.026434802 0.027249301 0.028808239 0.028870636 0.031034732 0.031531524 0.032766910 0.033545247 0.034460020 0.035459181 0.037627402 0.038449193 0.039468662 0.040062843 0.040960591 0.043561138 0.044328149 0.044690614 0.045777159 0.048538119 0.049259117 0.049826036 0.050518807 0.051040128 0.052212307 0.052355160 0.052455985 0.052663333 0.053795131 0.054168983 0.054814032 0.055173515 0.055943086 0.056370878 0.056494145 0.057213986 0.058411932 0.059542678 0.060743049 0.061194747 0.062071763 0.062190861 0.062636217 0.064085023 0.064964965 0.065792870 0.066030775 0.067104497 0.069645211 0.072019563 0.073859506 0.074928320 0.077002093 0.080939052 0.083802197 0.085467098 0.086092643 0.086460946 0.087570978 0.089934913 0.091027315 0.094009442 0.094520986 0.095834874 0.095933894 0.097429884 0.097984449 0.099277402 0.099618842 0.100298684 0.101270842 0.101515274 0.102043099 0.102950186 0.103175232 0.103856262 0.104868286 0.106615111 0.107436712 0.108560986 0.109725646 0.110662589 0.112144762 0.112821267 0.114083099 0.115394133 0.117628720 0.118961522 0.119751006 0.121442943 0.124786162 0.125593859 0.126138697 0.130833877 0.134116802 0.135129481 0.142004423 0.142506638 0.145311661 0.146516087 0.148136220 0.150555614 0.152289804 0.152904543 0.155086139 0.159526585 0.160632959 0.172307413 0.173141826 0.175958792 0.182885249 0.183713838 0.188458346 0.188823051 0.191631060 0.193424944 0.196811622 0.198740427 0.202968317 0.206057097 0.206755245 0.209630387 0.210130878 0.213054807 0.214448788 0.216732260 0.218579066 0.224431143 0.225184209 0.229940048 0.234103112 0.234609392 0.235093628 0.243781950 0.254976818 0.256667090 0.261357005 0.266616630 0.278459273 0.282455630 0.286094313 0.288976236 0.293293486 0.300559714 0.304595354 0.305221326 0.306843146 0.314105058 0.314753777 0.321731969 0.326894646 0.329567797 0.348004458 0.348685239 0.351239852 0.354635181 0.355775913 0.361297225 0.361786238 0.378413923 0.380289987 0.389563474 0.409027807 0.422662250 0.428128934 0.450519724 0.466563143 0.468835527 0.475635668 0.480664881 0.481347538 0.488308982 0.502979061 0.508965114 0.533500513 0.564877446 0.567629649 0.585971659 0.592214454 0.601031998 0.603750247 0.637938235 0.641844804 0.644813833 0.670706807 0.673319251 0.683874034 0.690019568 0.691260715 0.698441774 0.703885013 0.714627891 0.738781760 0.741335116 0.750229792 0.759585065 0.771883626 0.776833854 0.806442094 0.809828741 0.812937511 0.817715958 0.820297330 0.823513476 0.829653653 0.831826840 0.831995908 0.841515173 0.844985911 0.846229605 0.857599372 0.863829783 0.864653614 0.871115743 0.873623026 0.880661983 0.883504992 0.888307768 0.891671878 0.896478964 0.918398295 0.922365594 0.930861781 0.932820647 0.963876327 0.975375481 0.983984534 0.999548461 1.011692548 1.024612426 1.040228522 1.048436858 1.055407190 1.062206859 1.085584111 1.086541916 1.100111380 1.105149434 1.111827990 1.112751634 1.123097387 1.127878518 1.135024258 1.139253742 1.170564438 1.174593651 1.180111392 1.185898089 1.194073992 1.214492676 1.220575781 1.265510720 1.296333724 1.313981916 1.325974444 1.326730503 1.329706154 1.330776653 1.334362628 1.341636864 1.344579901 1.356323867 1.374963867 1.380890624 1.381361707 1.389566610 1.418743035 1.421086726 1.551064928 1.660081555 1.772402272</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">92</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.346051" y3="-0.0283562" z3="-0.17739733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38858642" y3="0.15714832" z3="0.42727122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63570353" y3="0.41797143" z3="-0.3229789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67763039" y3="1.18730209" z3="-2.2116155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37590229" y3="0.34115462" z3="-1.15806608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68202263" y3="0.770218" z3="-3.61341157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.55565313" y3="1.68678463" z3="-3.05650836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.26649637" y3="2.49941729" z3="-4.49333132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.49872977" y3="1.15643309" z3="-4.31067995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.37557601" y3="2.82375225" z3="-5.0398918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92490945" y3="-0.5590743" z3="-3.43447608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10184052" y3="-0.09777365" z3="-0.981132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42188411" y3="-1.22525635" z3="-2.00998883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94913812" y3="-1.120789" z3="-1.82350132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14110761" y3="-2.54333495" z3="-1.89315484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13035238" y3="-3.54728882" z3="0.60934978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.05885869" y3="-5.3908912" z3="-4.74222396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.27943947" y3="-5.08623164" z3="-3.71547038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85507499" y3="-4.27360569" z3="-1.12416816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76171595" y3="-4.71160823" z3="-2.86687681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.60320584" y3="-5.08090192" z3="-3.26639735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89156649" y3="-4.66796284" z3="-1.96777637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48505251" y3="-4.32254907" z3="-1.55455255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80179633" y3="-4.70860915" z3="-3.20664087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.41571037" y3="-5.37249698" z3="-3.93693814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93227278" y3="-4.63005895" z3="-1.63422448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02772314" y3="-3.77919441" z3="0.18258159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15868219" y3="-3.54579114" z3="0.83624915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05553378" y3="-3.99972107" z3="0.41223515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14235278" y3="-3.40210254" z3="2.30255375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18280071" y3="-3.20553815" z3="5.10018323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34234497" y3="-3.56234638" z3="3.01158809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96204579" y3="-3.15093444" z3="3.01885032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.97989481" y3="-3.05358095" z3="4.4073677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36219456" y3="-3.46538499" z3="4.40004045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26764581" y3="-3.77224916" z3="2.4677915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.00017379" y3="-3.05567315" z3="2.50995331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.04215413" y3="-2.88140111" z3="4.9440775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30397235" y3="-3.60093474" z3="4.93922216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.19568709" y3="-3.13771708" z3="6.19157997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42286648" y3="-3.9916989" z3="-0.65387124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19369064" y3="-3.51823262" z3="-1.11161924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49394652" y3="0.13472607" z3="-4.69684014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05288714" y3="-1.60938057" z3="-0.01782791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.81973547" y3="-0.84787644" z3="1.1260026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.72725127" y3="-0.23199843" z3="1.41555632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.24059311" y3="0.62375746" z3="1.13697834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.25061453" y3="1.44674633" z3="-0.52976136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.07868945" y3="-0.64545889" z3="1.42794665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.26550448" y3="1.88828327" z3="2.52003954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.76653495" y3="-0.79280868" z3="2.05172238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.47870128" y3="-0.17508287" z3="3.2956754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.06682795" y3="0.705243" z3="-1.32412904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.58437315" y3="2.17488366" z3="-0.56255538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.19252977" y3="2.00102282" z3="-0.71406737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03648175" y3="-0.9936626" z3="2.47347155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.07313058" y3="-0.20819377" z3="1.24100632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.97505052" y3="-1.49525769" z3="0.73332477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.35810463" y3="1.40129577" z3="3.50700009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.67525933" y3="2.46938798" z3="2.51845759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.09930937" y3="2.60408118" z3="2.40412565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.62048485" y3="-0.65738536" z3="3.78921417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.38168031" y3="-0.30874854" z3="3.90601601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.27248704" y3="0.89847497" z3="3.15791019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87392848" y3="-0.80851495" z3="1.00065595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41146035" y3="-2.12143104" z3="0.84474003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76261849" y3="-2.77084841" z3="1.88738744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59478977" y3="-2.09576237" z3="3.09287543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.11846604" y3="-0.82447812" z3="3.30666982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.76611723" y3="-0.18792618" z3="2.25257136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48421579" y3="-2.60345544" z3="-0.1320289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33621169" y3="-3.76554908" z3="1.75144433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73234058" y3="-2.68963704" z3="4.11930534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.97073699" y3="-0.32988077" z3="4.26714251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.13917384" y3="0.83175603" z3="2.38210294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84206024" y3="0.32717774" z3="-4.32187013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79978272" y3="-0.64900575" z3="-4.56338211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.40926588" y3="-1.82321487" z3="-5.19570462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1007684" y3="-2.02889465" z3="-5.62014071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.84824448" y3="-1.04747746" z3="-5.36146272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.12383325" y3="1.23527994" z3="-3.78320979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83606786" y3="-0.52466106" z3="-4.24433457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.40123222" y3="-2.88100975" z3="-5.3989328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.16404872" y3="-2.9569609" z3="-6.1269364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8856985" y3="-1.21133162" z3="-5.66015987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.43631343" y3="-2.00316953" z3="5.07801701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32185538" y3="-3.81669127" z3="3.93673775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.11918656" y3="-3.78330522" z3="-6.15850478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44638699" y3="-2.80289789" z3="-4.78433907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02561482" y3="1.18620474" z3="-1.45371543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04482747" y3="1.56691335" z3="-2.41550074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37880947" y3="1.57727887" z3="-1.64666992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.75469134" y3="2.29702691" z3="-2.75430868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.12103006" y3="1.28428334" z3="-0.89767683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79964143" y3="2.58776995" z3="-2.89454957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46991262" y3="2.29572447" z3="-3.56094162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.78744937" y3="2.65035674" z3="-3.72558961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7331934" y3="2.56517037" z3="-4.32137067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09239044" y3="3.20447017" z3="-4.61781128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.26560257" y3="3.08789399" z3="-3.1883201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.12976197" y3="3.48779732" z3="-3.9514705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.03177553" y3="4.10376714" z3="-2.54880102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.72101545" y3="5.43151122" z3="-2.70520221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.87750308" y3="3.82077967" z3="-1.92015364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.32457306" y3="6.1915059" z3="-2.19953944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.84198751" y3="4.87104831" z3="-4.10670173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.62181393" y3="5.82588146" z3="-3.50429424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.97424125" y3="5.16021887" z3="-4.70758001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.38519739" y3="6.88824801" z3="-3.62290183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47272854" y3="-2.05140555" z3="-0.28735107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48816262" y3="-2.87106564" z3="-1.02582189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99226217" y3="-2.38504751" z3="0.62481553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07030681" y3="-1.22658954" z3="-0.72020773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17654316" y3="-1.35736638" z3="-1.21887049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29809546" y3="-0.31973765" z3="-1.58254163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09786195" y3="-1.5056861" z3="-1.04182577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45674288" y3="-2.02333683" z3="-2.04904835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3461,-.0284,-.1774;7.3886,.1571,.4273;6.6357,.418,-.323;4.6776,1.1873,-2.2116;4.3759,.3412,-1.1581;2.682,.7702,-3.6134;3.5557,1.6868,-3.0565;1.2665,2.4994,-4.4933;1.4987,1.1564,-4.3107;.3756,2.8238,-5.0399;2.9249,-.5591,-3.4345;3.1018,-.0978,-.9811;2.4219,-1.2253,-2.01;.9491,-1.1208,-1.8235;3.1411,-2.5433,-1.8932;-.1304,-3.5473,.6093;-.0589,-5.3909,-4.7422;-.2794,-5.0862,-3.7155;-.8551,-4.2736,-1.1242;.7617,-4.7116,-2.8669;-1.6032,-5.0809,-3.2664;-1.8916,-4.668,-1.9678;.4851,-4.3225,-1.5546;1.8018,-4.7086,-3.2066;-2.4157,-5.3725,-3.9369;-2.9323,-4.6301,-1.6342;-1.0277,-3.7792,.1826;-2.1587,-3.5458,.8362;-3.0555,-3.9997,.4122;-2.1424,-3.4021,2.3026;-2.1828,-3.2055,5.1002;-3.3423,-3.5623,3.0116;-.962,-3.1509,3.0189;-.9799,-3.0536,4.4074;-3.3622,-3.4654,4.4;-4.2676,-3.7722,2.4678;.0002,-3.0557,2.51;-.0422,-2.8814,4.9441;-4.304,-3.6009,4.9392;-2.1957,-3.1377,6.1916;1.4229,-3.9917,-.6539;2.1937,-3.5182,-1.1116;.4939,.1347,-4.6968;-3.0529,-1.6094,-.0178;-2.8197,-.8479,1.126;-1.7273,-.232,1.4156;-.2406,.6238,1.137;-.2506,1.4467,-.5298;1.0787,-.6455,1.4279;-.2655,1.8883,2.52;-3.7665,-.7928,2.0517;-3.4787,-.1751,3.2957;-.0668,.7052,-1.3241;.5844,2.1749,-.5626;-1.1925,2.001,-.7141;1.0365,-.9937,2.4735;2.0731,-.2082,1.241;.9751,-1.4953,.7333;-.3581,1.4013,3.507;.6753,2.4694,2.5185;-1.0993,2.6041,2.4041;-2.6205,-.6574,3.7892;-4.3817,-.3087,3.906;-3.2725,.8985,3.1579;4.8739,-.8085,1.0007;4.4115,-2.1214,.8447;3.7626,-2.7708,1.8874;3.5948,-2.0958,3.0929;4.1185,-.8245,3.3067;4.7661,-.1879,2.2526;4.4842,-2.6035,-.132;3.3362,-3.7655,1.7514;2.7323,-2.6896,4.1193;3.9707,-.3299,4.2671;5.1392,.8318,2.3821;-.8421,.3272,-4.3219;-1.7998,-.649,-4.5634;-1.4093,-1.8232,-5.1957;-.1008,-2.0289,-5.6201;.8482,-1.0475,-5.3615;-1.1238,1.2353,-3.7832;-2.8361,-.5247,-4.2443;-2.4012,-2.881,-5.3989;.164,-2.957,-6.1269;1.8857,-1.2113,-5.6602;2.4363,-2.0032,5.078;2.3219,-3.8167,3.9367;-2.1192,-3.7833,-6.1585;-3.4464,-2.8029,-4.7843;7.0256,1.1862,-1.4537;6.0448,1.5669,-2.4155;8.3788,1.5773,-1.6467;8.7547,2.297,-2.7543;9.121,1.2843,-.8977;9.7996,2.5878,-2.8945;6.4699,2.2957,-3.5609;7.7874,2.6504,-3.7256;5.7332,2.5652,-4.3214;8.0924,3.2045,-4.6178;3.2656,3.0879,-3.1883;2.1298,3.4878,-3.9515;4.0318,4.1038,-2.5488;3.721,5.4315,-2.7052;4.8775,3.8208,-1.9202;4.3246,6.1915,-2.1995;1.842,4.871,-4.1067;2.6218,5.8259,-3.5043;.9742,5.1602,-4.7076;2.3852,6.8882,-3.6229;-4.4727,-2.0514,-.2874;-4.4882,-2.8711,-1.0258;-4.9923,-2.385,.6248;-5.0703,-1.2266,-.7202;-2.1765,-1.3574,-1.2189;-2.2981,-.3197,-1.5825;-1.0979,-1.5057,-1.0418;-2.4567,-2.0233,-2.049;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650087796812</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005233274798 0.000697371784 0.016877373304 0.005339525733</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030381286 -0.002526578 0.000126896 0.000222154 0.000257194 0.000354806 0.000361831 0.000410254 0.000567910 0.000693380 0.000873297 0.000895507 0.001004385 0.001046403 0.001184367 0.001237126 0.001480844 0.001518899 0.001685542 0.001697094 0.001818023 0.002035280 0.002241443 0.002444482 0.002467867 0.002895167 0.003007394 0.003210324 0.003397783 0.003547177 0.004026580 0.004210987 0.004535054 0.004660307 0.005400582 0.005523851 0.005630751 0.005993952 0.006566316 0.006825113 0.007458151 0.007811044 0.008433964 0.008885439 0.009113146 0.009541867 0.009981099 0.010812064 0.010998567 0.011156525 0.012184659 0.012535351 0.013261052 0.013386139 0.014270295 0.014757284 0.015079443 0.015329870 0.015560771 0.015947945 0.016259239 0.017024453 0.018152351 0.018545166 0.018960952 0.019968297 0.020674231 0.021001206 0.021406070 0.022088100 0.022832165 0.024456874 0.025063558 0.025920351 0.026440064 0.027263850 0.028808549 0.028870535 0.031034721 0.031531853 0.032823135 0.033547830 0.034469881 0.035460082 0.037660145 0.038458963 0.039468612 0.040059011 0.040976495 0.043571849 0.044378843 0.044694889 0.045817076 0.048538326 0.049259100 0.049826071 0.050548825 0.051042158 0.052231008 0.052357165 0.052468883 0.052663522 0.053815309 0.054168955 0.054825957 0.055174422 0.055947782 0.056370566 0.056502764 0.057213587 0.058439039 0.059542793 0.060746874 0.061194730 0.062111066 0.062216168 0.062630047 0.064132195 0.064964914 0.065792303 0.066032744 0.067115078 0.069658989 0.072029258 0.073859798 0.074928444 0.077004370 0.081093149 0.083816663 0.085471495 0.086175101 0.086482005 0.087573103 0.089953140 0.091061028 0.094010491 0.094521002 0.095842195 0.095956766 0.097433443 0.098040437 0.099281891 0.099646325 0.100310243 0.101282211 0.101519948 0.102243493 0.102997194 0.103175138 0.103856101 0.104910293 0.106616115 0.107449732 0.108653257 0.109727843 0.110753888 0.112163237 0.112820201 0.114105164 0.116087790 0.118034030 0.118999226 0.119874644 0.121501238 0.124851003 0.125794452 0.126268178 0.130836781 0.134286481 0.135203085 0.142038705 0.142508578 0.145391378 0.146577192 0.148241077 0.150595992 0.152409438 0.152940298 0.155156654 0.159530714 0.160632725 0.172342916 0.173177892 0.176038194 0.182891885 0.183749636 0.188458759 0.188871236 0.191702975 0.193448254 0.196811840 0.199009692 0.202970246 0.206302777 0.206756565 0.209631059 0.210139320 0.213057628 0.214450311 0.216739546 0.218595249 0.224441419 0.225197889 0.230000402 0.234183309 0.234611333 0.235111763 0.243809967 0.254976622 0.256699079 0.261385186 0.266616412 0.278459490 0.282520013 0.286094571 0.288977382 0.293342554 0.300567512 0.304598081 0.305221264 0.306872792 0.314146277 0.314761617 0.321735599 0.326903602 0.329601539 0.348045643 0.348688022 0.351268855 0.354636106 0.355776181 0.361383265 0.361787721 0.378421197 0.380985308 0.389563753 0.409034818 0.422668098 0.428122993 0.450519794 0.466593907 0.468847803 0.475635691 0.480741895 0.481353343 0.488327979 0.503031940 0.508983512 0.533502903 0.564912912 0.567680688 0.585986360 0.592214942 0.601587682 0.603771632 0.638053085 0.641845706 0.644890332 0.670731645 0.673559049 0.683889810 0.690625512 0.691268547 0.698496263 0.703885056 0.714639218 0.738790824 0.741991855 0.750370832 0.759587856 0.771883728 0.776919972 0.806591927 0.809894323 0.812951089 0.817832324 0.820337768 0.823513635 0.829662091 0.831829776 0.832025535 0.841562667 0.845020347 0.846284405 0.857606671 0.863850104 0.864660632 0.871145341 0.874354642 0.882538884 0.883808971 0.888310165 0.891674912 0.896702392 0.918581481 0.922397674 0.930862914 0.932843148 0.963886226 0.975381837 0.983991894 0.999595789 1.011888167 1.024612792 1.040256586 1.048438769 1.055411484 1.062214070 1.085590767 1.086549588 1.100137671 1.105157640 1.111850284 1.112788438 1.123103836 1.129917180 1.135025896 1.139267618 1.170565238 1.174687065 1.180157413 1.185946006 1.194073990 1.214611197 1.220585489 1.265511279 1.296387149 1.314003120 1.326131845 1.326936725 1.329705787 1.330838342 1.334472304 1.341637164 1.344606961 1.356493864 1.374965021 1.380910008 1.381661745 1.389567217 1.418745252 1.421248752 1.551064988 1.660081768 1.772405626</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">93</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34463997" y3="-0.02801865" z3="-0.17706369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38596643" y3="0.161925" z3="0.42984468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63335224" y3="0.42189946" z3="-0.320858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67531449" y3="1.18785078" z3="-2.21088374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37449038" y3="0.3400956" z3="-1.15829165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68079563" y3="0.76990135" z3="-3.61276067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.55342081" y3="1.68612427" z3="-3.05629804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.26444942" y3="2.49734646" z3="-4.49394674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.49740591" y3="1.15579101" z3="-4.30933869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.37422453" y3="2.82007516" z3="-5.04254831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92625602" y3="-0.55978455" z3="-3.43588388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10127748" y3="-0.10151657" z3="-0.98231129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42193686" y3="-1.22804304" z3="-2.01270425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94907954" y3="-1.12315588" z3="-1.82754532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.14035729" y3="-2.54682094" z3="-1.89658837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13421684" y3="-3.54834934" z3="0.61009261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.06612159" y3="-5.38950217" z3="-4.74044841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.28593244" y3="-5.08504697" z3="-3.71378732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85965156" y3="-4.27577606" z3="-1.12261217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.75373986" y3="-4.70907015" z3="-2.86591454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.6062511" y3="-5.08513796" z3="-3.2640787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89383386" y3="-4.6732371" z3="-1.96534805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47813808" y3="-4.32066104" z3="-1.5537994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.7909635" y3="-4.70104823" z3="-3.2048946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.41765041" y3="-5.37686052" z3="-3.93455362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93235195" y3="-4.63991065" z3="-1.63121926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03149923" y3="-3.78101169" z3="0.18415906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16184377" y3="-3.54287902" z3="0.83759076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06024238" y3="-3.99476608" z3="0.41443163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14428685" y3="-3.39758485" z3="2.30392144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18427872" y3="-3.19759972" z3="5.10133355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34443724" y3="-3.55260663" z3="3.01329824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96322516" y3="-3.15090743" z3="3.01993304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98087813" y3="-3.05179018" z3="4.40834294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36395305" y3="-3.45412938" z3="4.40160015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27012176" y3="-3.75971687" z3="2.46982986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00063396" y3="-3.06079044" z3="2.51149568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.04279934" y3="-2.88287629" z3="4.94478472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30617795" y3="-3.58517547" z3="4.94080681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.19737149" y3="-3.12796018" z3="6.19254344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41598762" y3="-3.98832657" z3="-0.65410679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19024593" y3="-3.51956189" z3="-1.11321835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49501354" y3="0.13076722" z3="-4.69979768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05129022" y3="-1.60536426" z3="-0.01862475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.81937552" y3="-0.84228883" z3="1.12435406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.72432025" y3="-0.22887503" z3="1.41396862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.23333575" y3="0.62123484" z3="1.13824377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.23794106" y3="1.45106118" z3="-0.52657645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.08030932" y3="-0.65611593" z3="1.4272574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.25184596" y3="1.88064862" z3="2.52595089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.76863518" y3="-0.78173267" z3="2.04801919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.47747296" y3="-0.16541911" z3="3.2935247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.05980336" y3="0.70757176" z3="-1.32331923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.59523062" y3="2.17619642" z3="-0.55659584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.17686425" y3="2.00051234" z3="-0.70787121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03590804" y3="-1.0076935" z3="2.47206316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.07656956" y3="-0.2212502" z3="1.24248374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.97387256" y3="-1.5035301" z3="0.72984689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.34538326" y3="1.39009662" z3="3.51062227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.69087271" y3="2.45763791" z3="2.52663645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.08243199" y3="2.59992414" z3="2.4147765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.61819885" y3="-0.65347674" z3="3.78417348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.38097044" y3="-0.29550024" z3="3.9050519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.26625709" y3="0.90824321" z3="3.15717907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87370195" y3="-0.81062326" z3="0.99984611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41092399" y3="-2.12338334" z3="0.84127639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76350656" y3="-2.7752297" z3="1.88331867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59725551" y3="-2.10282804" z3="3.09080171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.12139138" y3="-0.83194469" z3="3.30708686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.76762108" y3="-0.19290824" z3="2.25355201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48199755" y3="-2.60318357" z3="-0.137047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33681169" y3="-3.76972812" z3="1.74542804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73554897" y3="-2.69864865" z3="4.11679639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.9751202" y3="-0.33958286" z3="4.26921657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.14076005" y3="0.82661796" z3="2.38515791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.84280499" y3="0.31971359" z3="-4.32546963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79930051" y3="-0.65676403" z3="-4.56756379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.40619466" y3="-1.8299536" z3="-5.20069916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.09563523" y3="-2.03198381" z3="-5.62439691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85192188" y3="-1.05038502" z3="-5.36673843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.12525411" y3="1.22692108" z3="-3.78479393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83442457" y3="-0.53252454" z3="-4.24990571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.3966229" y3="-2.88936732" z3="-5.40656537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17094868" y3="-2.95939035" z3="-6.13201555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.88825144" y3="-1.2145233" z3="-5.66353431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.44198629" y3="-2.01469226" z3="5.07820667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32314394" y3="-3.82456601" z3="3.93129056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.11220023" y3="-3.79209147" z3="-6.16421215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4431061" y3="-2.81075994" z3="-4.79486991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02261296" y3="1.19245654" z3="-1.45035282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04186308" y3="1.57092509" z3="-2.41304228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37507754" y3="1.58801064" z3="-1.64119126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.75040327" y3="2.31006015" z3="-2.74769421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.11730279" y3="1.29705498" z3="-0.89136969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79474227" y3="2.60420337" z3="-2.88629792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46640499" y3="2.30150003" z3="-3.55752666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.78331728" y3="2.66078882" z3="-3.72010243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.72996683" y3="2.56922413" z3="-4.31882353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.0878031" y3="3.2165704" z3="-4.61155425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.26329359" y3="3.08532128" z3="-3.19042347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.1274662" y3="3.48432879" z3="-3.95442098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.02733377" y3="4.10166715" z3="-2.55030443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.7099128" y3="5.43220162" z3="-2.7020727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.87148743" y3="3.82054127" z3="-1.91888171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.31328425" y3="6.19146716" z3="-2.19808023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.83607687" y3="4.86806094" z3="-4.1092258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.61159708" y3="5.82565983" z3="-3.50297203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.96923235" y3="5.15553259" z3="-4.712208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.3781665" y3="6.88497243" z3="-3.62679275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4706458" y3="-2.04440276" z3="-0.29137168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48647569" y3="-2.86456062" z3="-1.02945547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99252892" y3="-2.37645214" z3="0.6199958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06556617" y3="-1.21820307" z3="-0.72541024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17204278" y3="-1.35426599" z3="-1.21650496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29178667" y3="-0.31651546" z3="-1.58123202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09462605" y3="-1.50404368" z3="-1.03582204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45029083" y3="-2.01966172" z3="-2.04743919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3446,-.028,-.1771;7.386,.1619,.4298;6.6334,.4219,-.3209;4.6753,1.1879,-2.2109;4.3745,.3401,-1.1583;2.6808,.7699,-3.6128;3.5534,1.6861,-3.0563;1.2644,2.4973,-4.4939;1.4974,1.1558,-4.3093;.3742,2.8201,-5.0425;2.9263,-.5598,-3.4359;3.1013,-.1015,-.9823;2.4219,-1.228,-2.0127;.9491,-1.1232,-1.8275;3.1404,-2.5468,-1.8966;-.1342,-3.5483,.6101;-.0661,-5.3895,-4.7404;-.2859,-5.085,-3.7138;-.8597,-4.2758,-1.1226;.7537,-4.7091,-2.8659;-1.6063,-5.0851,-3.2641;-1.8938,-4.6732,-1.9653;.4781,-4.3207,-1.5538;1.791,-4.701,-3.2049;-2.4177,-5.3769,-3.9346;-2.9324,-4.6399,-1.6312;-1.0315,-3.781,.1842;-2.1618,-3.5429,.8376;-3.0602,-3.9948,.4144;-2.1443,-3.3976,2.3039;-2.1843,-3.1976,5.1013;-3.3444,-3.5526,3.0133;-.9632,-3.1509,3.0199;-.9809,-3.0518,4.4083;-3.364,-3.4541,4.4016;-4.2701,-3.7597,2.4698;-.0006,-3.0608,2.5115;-.0428,-2.8829,4.9448;-4.3062,-3.5852,4.9408;-2.1974,-3.128,6.1925;1.416,-3.9883,-.6541;2.1902,-3.5196,-1.1132;.495,.1308,-4.6998;-3.0513,-1.6054,-.0186;-2.8194,-.8423,1.1244;-1.7243,-.2289,1.414;-.2333,.6212,1.1382;-.2379,1.4511,-.5266;1.0803,-.6561,1.4273;-.2518,1.8806,2.526;-3.7686,-.7817,2.048;-3.4775,-.1654,3.2935;-.0598,.7076,-1.3233;.5952,2.1762,-.5566;-1.1769,2.0005,-.7079;1.0359,-1.0077,2.4721;2.0766,-.2213,1.2425;.9739,-1.5035,.7298;-.3454,1.3901,3.5106;.6909,2.4576,2.5266;-1.0824,2.5999,2.4148;-2.6182,-.6535,3.7842;-4.381,-.2955,3.9051;-3.2663,.9082,3.1572;4.8737,-.8106,.9998;4.4109,-2.1234,.8413;3.7635,-2.7752,1.8833;3.5973,-2.1028,3.0908;4.1214,-.8319,3.3071;4.7676,-.1929,2.2536;4.482,-2.6032,-.137;3.3368,-3.7697,1.7454;2.7355,-2.6986,4.1168;3.9751,-.3396,4.2692;5.1408,.8266,2.3852;-.8428,.3197,-4.3255;-1.7993,-.6568,-4.5676;-1.4062,-1.83,-5.2007;-.0956,-2.032,-5.6244;.8519,-1.0504,-5.3667;-1.1253,1.2269,-3.7848;-2.8344,-.5325,-4.2499;-2.3966,-2.8894,-5.4066;.1709,-2.9594,-6.132;1.8883,-1.2145,-5.6635;2.442,-2.0147,5.0782;2.3231,-3.8246,3.9313;-2.1122,-3.7921,-6.1642;-3.4431,-2.8108,-4.7949;7.0226,1.1925,-1.4504;6.0419,1.5709,-2.413;8.3751,1.588,-1.6412;8.7504,2.3101,-2.7477;9.1173,1.2971,-.8914;9.7947,2.6042,-2.8863;6.4664,2.3015,-3.5575;7.7833,2.6608,-3.7201;5.73,2.5692,-4.3188;8.0878,3.2166,-4.6116;3.2633,3.0853,-3.1904;2.1275,3.4843,-3.9544;4.0273,4.1017,-2.5503;3.7099,5.4322,-2.7021;4.8715,3.8205,-1.9189;4.3133,6.1915,-2.1981;1.8361,4.8681,-4.1092;2.6116,5.8257,-3.503;.9692,5.1555,-4.7122;2.3782,6.885,-3.6268;-4.4706,-2.0444,-.2914;-4.4865,-2.8646,-1.0295;-4.9925,-2.3765,.62;-5.0656,-1.2182,-.7254;-2.172,-1.3543,-1.2165;-2.2918,-.3165,-1.5812;-1.0946,-1.504,-1.0358;-2.4503,-2.0197,-2.0474;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650084472147</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005026209549 0.000597387208 0.018422489961 0.005335159049</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030381897 -0.001981431 0.000065541 0.000218283 0.000255880 0.000361140 0.000368187 0.000410131 0.000568257 0.000691908 0.000875200 0.000900198 0.001004328 0.001047022 0.001183907 0.001238818 0.001480367 0.001519143 0.001685593 0.001709848 0.001818011 0.002048320 0.002241705 0.002442958 0.002468843 0.002903092 0.003007907 0.003222944 0.003397450 0.003549087 0.004033921 0.004215147 0.004598760 0.004660516 0.005440079 0.005533983 0.005658776 0.005994045 0.006566219 0.006825261 0.007462130 0.007813916 0.008441216 0.008884342 0.009121583 0.009549910 0.010001625 0.010818882 0.011014185 0.011218701 0.012190848 0.012539206 0.013310149 0.013435127 0.014270759 0.014758690 0.015081858 0.015329039 0.015567754 0.015977076 0.016289129 0.017044326 0.018170996 0.018545277 0.018999719 0.019971358 0.020679857 0.021001425 0.021414290 0.022088523 0.022833585 0.024473104 0.025063199 0.025922362 0.026464902 0.027286125 0.028811102 0.028872086 0.031036141 0.031531513 0.032839039 0.033547690 0.034481983 0.035465577 0.037689112 0.038457367 0.039471179 0.040069215 0.041005970 0.043577258 0.044376401 0.044698115 0.045838515 0.048541188 0.049259530 0.049826020 0.050544689 0.051043891 0.052230631 0.052357281 0.052476208 0.052664042 0.053869192 0.054170106 0.054851132 0.055174839 0.055947155 0.056370775 0.056501300 0.057215691 0.058438030 0.059554475 0.060750222 0.061196968 0.062129554 0.062248012 0.062736526 0.064176767 0.064966311 0.065795103 0.066033650 0.067135934 0.069657738 0.072027791 0.073862564 0.074932284 0.077027728 0.081277536 0.083832925 0.085499345 0.086252730 0.086493020 0.087572780 0.089963057 0.091116784 0.094011228 0.094521013 0.095846231 0.096041276 0.097433652 0.098085597 0.099285952 0.099716385 0.100349999 0.101283017 0.101526480 0.102335673 0.103042023 0.103185736 0.103855438 0.104931835 0.106626693 0.107459405 0.108683892 0.109727569 0.110814125 0.112164814 0.112833042 0.114106107 0.116334474 0.118395456 0.119017556 0.120074532 0.121562166 0.124891190 0.125877510 0.126472406 0.130850274 0.134365473 0.135201392 0.142054180 0.142540646 0.145424161 0.146589775 0.148380848 0.150619169 0.152470610 0.152946097 0.155251478 0.159534171 0.160637840 0.172427021 0.173180786 0.176107039 0.182922749 0.183754205 0.188469820 0.188876863 0.191711326 0.193466955 0.196817088 0.199217757 0.203059078 0.206418428 0.206757931 0.209632707 0.210151581 0.213072356 0.214459233 0.216746322 0.218595492 0.224476170 0.225213738 0.230057350 0.234294153 0.234611360 0.235167968 0.243835707 0.254981054 0.256716346 0.261431550 0.266616403 0.278467512 0.282615050 0.286094617 0.288993081 0.293351548 0.300576757 0.304622491 0.305237776 0.306875973 0.314167867 0.314772545 0.321735478 0.326927383 0.329630064 0.348435226 0.348708210 0.351300275 0.354639379 0.355776287 0.361400677 0.361794603 0.378421162 0.381252800 0.389565698 0.409060745 0.422673056 0.428182644 0.450519924 0.466612460 0.468885826 0.475635817 0.480758295 0.481361095 0.488340255 0.503093562 0.508993284 0.533505317 0.564932715 0.567742480 0.586007187 0.592221121 0.601788542 0.603786333 0.638381129 0.641911953 0.644924302 0.670731268 0.673730321 0.683967872 0.690726058 0.691277287 0.698525735 0.703885377 0.714640880 0.738811114 0.742221197 0.750488073 0.759616749 0.771883722 0.777007505 0.806857318 0.809912079 0.812962467 0.817869435 0.820362472 0.823515350 0.829664992 0.831834952 0.832050680 0.841563679 0.845029145 0.846290410 0.857626283 0.863857341 0.864663771 0.871180682 0.874521707 0.882957770 0.884163894 0.888417682 0.891676143 0.896927377 0.918587727 0.922406520 0.930862939 0.932861843 0.963886263 0.975383085 0.984014196 0.999624615 1.012019786 1.024630988 1.040270874 1.048438861 1.055413577 1.062232100 1.085602103 1.086552501 1.100138302 1.105158192 1.111872470 1.112852529 1.123106488 1.131884513 1.135028328 1.139332025 1.170573078 1.174792197 1.180235371 1.185985541 1.194074811 1.214718849 1.220587216 1.265521838 1.296455268 1.314021178 1.326220635 1.327003184 1.329715238 1.330893902 1.334666361 1.341646779 1.344606721 1.357065368 1.374965005 1.380957044 1.381833376 1.389567155 1.418745973 1.421329342 1.551066472 1.660083305 1.772416077</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">94</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34265134" y3="-0.02552717" z3="-0.17745997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3826438" y3="0.1681139" z3="0.43282414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63058321" y3="0.42737926" z3="-0.31873703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67419066" y3="1.19092365" z3="-2.21128051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37317177" y3="0.34222038" z3="-1.15955112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68317738" y3="0.76810967" z3="-3.61834577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.55283197" y3="1.68703349" z3="-3.05893717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.26435083" y3="2.49394239" z3="-4.50077103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50015037" y3="1.15114414" z3="-4.31788338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.37343639" y3="2.81634693" z3="-5.04851036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9288635" y3="-0.56029785" z3="-3.43858378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10030455" y3="-0.10015512" z3="-0.98498017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4206045" y3="-1.22578538" z3="-2.01593227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94760536" y3="-1.11774257" z3="-1.83377816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13580497" y3="-2.54565012" z3="-1.89666533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13652119" y3="-3.55121561" z3="0.61481383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.07153352" y3="-5.39003157" z3="-4.73823501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29048514" y3="-5.08659199" z3="-3.71106967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8629655" y3="-4.27603529" z3="-1.11867503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74969303" y3="-4.70790856" z3="-2.8646806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61208818" y3="-5.08618141" z3="-3.2593701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89896276" y3="-4.67409573" z3="-1.96023106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47599137" y3="-4.32151438" z3="-1.5516414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78809971" y3="-4.70057544" z3="-3.20599455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42240846" y3="-5.38183963" z3="-3.92850833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93918413" y3="-4.63840811" z3="-1.62438023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03441643" y3="-3.78136058" z3="0.18808754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16456171" y3="-3.54137873" z3="0.84075414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06379244" y3="-3.99147311" z3="0.41739036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14757666" y3="-3.3954654" z3="2.30695105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.18781469" y3="-3.19149892" z3="5.10418985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.348948" y3="-3.54449963" z3="3.01598021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96607903" y3="-3.15249417" z3="3.02324112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98380539" y3="-3.05114886" z3="4.4114575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36868923" y3="-3.44387691" z3="4.40414218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27587913" y3="-3.74765578" z3="2.47231908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00313767" y3="-3.06704608" z3="2.51499656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.04511018" y3="-2.88513908" z3="4.94782299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31169624" y3="-3.57035829" z3="4.94316289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20100012" y3="-3.12015882" z3="6.19534569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41555103" y3="-3.98931326" z3="-0.65268865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18424011" y3="-3.51660421" z3="-1.11150684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.4979629" y3="0.12695336" z3="-4.70502156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04784749" y3="-1.60264436" z3="-0.01807266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.81463495" y3="-0.83969117" z3="1.12586259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.72088503" y3="-0.22725696" z3="1.41797602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.22679841" y3="0.61552611" z3="1.14178387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.23282815" y3="1.44959736" z3="-0.51943983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0816531" y3="-0.66743627" z3="1.42272775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.23675564" y3="1.86874794" z3="2.53492794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.76441155" y3="-0.77867127" z3="2.04838288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.48088132" y3="-0.1586585" z3="3.29064444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.05519651" y3="0.71169048" z3="-1.31861478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.60646666" y3="2.17153016" z3="-0.5480647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.17002118" y3="2.00650439" z3="-0.69922279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03816869" y3="-1.02160552" z3="2.46632273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.07886686" y3="-0.23565148" z3="1.23747663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.97102468" y3="-1.512819" z3="0.7235622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.33124488" y3="1.3742632" z3="3.51783723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.70886649" y3="2.44118629" z3="2.53632399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.0640095" y3="2.59307207" z3="2.42781116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.62710036" y3="-0.64189319" z3="3.78921714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.38647093" y3="-0.28843669" z3="3.89622479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.269885" y3="0.91427069" z3="3.15104034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87257078" y3="-0.8113211" z3="0.99775596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4119059" y3="-2.12432084" z3="0.83700304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76561495" y3="-2.77933377" z3="1.87781998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5989797" y3="-2.11000892" z3="3.08667972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.12146183" y3="-0.83905725" z3="3.30522493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.76599697" y3="-0.19669761" z3="2.25263761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48391845" y3="-2.60232324" z3="-0.14157873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33973525" y3="-3.77381656" z3="1.73766341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73796246" y3="-2.70872489" z3="4.1116866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.97483533" y3="-0.34909557" z3="4.26819274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.13775851" y3="0.82294388" z3="2.38621007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83856991" y3="0.31544564" z3="-4.32904894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79428076" y3="-0.66194049" z3="-4.57069308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.40166171" y3="-1.83443761" z3="-5.20478775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.09249595" y3="-2.03646644" z3="-5.6300665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85455281" y3="-1.05359835" z3="-5.37091316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.12180334" y3="1.22205484" z3="-3.78858664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82908832" y3="-0.53848197" z3="-4.25140579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.39159711" y3="-2.89359001" z3="-5.40963632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17441902" y3="-2.96324012" z3="-6.13821807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89223876" y3="-1.21490232" z3="-5.66951315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.44747504" y3="-2.02830503" z3="5.07661503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32279802" y3="-3.83309155" z3="3.92183326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.10630993" y3="-3.7972426" z3="-6.16610742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43857131" y3="-2.81450277" z3="-4.79898826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02003947" y3="1.19976793" z3="-1.44676894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04030348" y3="1.57668567" z3="-2.41100042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37168754" y3="1.59765689" z3="-1.63505362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.74727844" y3="2.32019064" z3="-2.74078009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.11293942" y3="1.30791249" z3="-0.88392263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79100402" y3="2.61598562" z3="-2.87749216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46529958" y3="2.30839367" z3="-3.554533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.78140308" y3="2.66936445" z3="-3.7148578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.729665" y3="2.57471978" z3="-4.31707523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08619745" y3="3.22559147" z3="-4.60569245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.25933072" y3="3.08719557" z3="-3.19202234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.12398057" y3="3.48471631" z3="-3.95749445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.02124089" y3="4.1050472" z3="-2.55139084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.70713803" y3="5.43219772" z3="-2.70915012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.86638585" y3="3.82392536" z3="-1.92073196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.30706494" y3="6.19405811" z3="-2.20156968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.83244977" y3="4.86761258" z3="-4.11374376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.60812072" y3="5.82480387" z3="-3.50997025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.96479992" y3="5.15507098" z3="-4.71596544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.36698747" y3="6.88772449" z3="-3.62768904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46929987" y3="-2.03843911" z3="-0.29206633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48674264" y3="-2.86021495" z3="-1.02935457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99428636" y3="-2.36749538" z3="0.61911776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06063395" y3="-1.21100256" z3="-0.72866797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16643707" y3="-1.35441157" z3="-1.21598645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28447501" y3="-0.31684909" z3="-1.58110551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08864599" y3="-1.5055291" z3="-1.03485654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44530613" y3="-2.02072158" z3="-2.04676091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3427,-.0255,-.1775;7.3826,.1681,.4328;6.6306,.4274,-.3187;4.6742,1.1909,-2.2113;4.3732,.3422,-1.1596;2.6832,.7681,-3.6183;3.5528,1.687,-3.0589;1.2644,2.4939,-4.5008;1.5002,1.1511,-4.3179;.3734,2.8163,-5.0485;2.9289,-.5603,-3.4386;3.1003,-.1002,-.985;2.4206,-1.2258,-2.0159;.9476,-1.1177,-1.8338;3.1358,-2.5457,-1.8967;-.1365,-3.5512,.6148;-.0715,-5.39,-4.7382;-.2905,-5.0866,-3.7111;-.863,-4.276,-1.1187;.7497,-4.7079,-2.8647;-1.6121,-5.0862,-3.2594;-1.899,-4.6741,-1.9602;.476,-4.3215,-1.5516;1.7881,-4.7006,-3.206;-2.4224,-5.3818,-3.9285;-2.9392,-4.6384,-1.6244;-1.0344,-3.7814,.1881;-2.1646,-3.5414,.8408;-3.0638,-3.9915,.4174;-2.1476,-3.3955,2.307;-2.1878,-3.1915,5.1042;-3.3489,-3.5445,3.016;-.9661,-3.1525,3.0232;-.9838,-3.0511,4.4115;-3.3687,-3.4439,4.4041;-4.2759,-3.7477,2.4723;-.0031,-3.067,2.515;-.0451,-2.8851,4.9478;-4.3117,-3.5704,4.9432;-2.201,-3.1202,6.1953;1.4156,-3.9893,-.6527;2.1842,-3.5166,-1.1115;.498,.127,-4.705;-3.0478,-1.6026,-.0181;-2.8146,-.8397,1.1259;-1.7209,-.2273,1.418;-.2268,.6155,1.1418;-.2328,1.4496,-.5194;1.0817,-.6674,1.4227;-.2368,1.8687,2.5349;-3.7644,-.7787,2.0484;-3.4809,-.1587,3.2906;-.0552,.7117,-1.3186;.6065,2.1715,-.5481;-1.17,2.0065,-.6992;1.0382,-1.0216,2.4663;2.0789,-.2357,1.2375;.971,-1.5128,.7236;-.3312,1.3743,3.5178;.7089,2.4412,2.5363;-1.064,2.5931,2.4278;-2.6271,-.6419,3.7892;-4.3865,-.2884,3.8962;-3.2699,.9143,3.151;4.8726,-.8113,.9978;4.4119,-2.1243,.837;3.7656,-2.7793,1.8778;3.599,-2.11,3.0867;4.1215,-.8391,3.3052;4.766,-.1967,2.2526;4.4839,-2.6023,-.1416;3.3397,-3.7738,1.7377;2.738,-2.7087,4.1117;3.9748,-.3491,4.2682;5.1378,.8229,2.3862;-.8386,.3154,-4.329;-1.7943,-.6619,-4.5707;-1.4017,-1.8344,-5.2048;-.0925,-2.0365,-5.6301;.8546,-1.0536,-5.3709;-1.1218,1.2221,-3.7886;-2.8291,-.5385,-4.2514;-2.3916,-2.8936,-5.4096;.1744,-2.9632,-6.1382;1.8922,-1.2149,-5.6695;2.4475,-2.0283,5.0766;2.3228,-3.8331,3.9218;-2.1063,-3.7972,-6.1661;-3.4386,-2.8145,-4.799;7.02,1.1998,-1.4468;6.0403,1.5767,-2.411;8.3717,1.5977,-1.6351;8.7473,2.3202,-2.7408;9.1129,1.3079,-.8839;9.791,2.616,-2.8775;6.4653,2.3084,-3.5545;7.7814,2.6694,-3.7149;5.7297,2.5747,-4.3171;8.0862,3.2256,-4.6057;3.2593,3.0872,-3.192;2.124,3.4847,-3.9575;4.0212,4.105,-2.5514;3.7071,5.4322,-2.7092;4.8664,3.8239,-1.9207;4.3071,6.1941,-2.2016;1.8324,4.8676,-4.1137;2.6081,5.8248,-3.51;.9648,5.1551,-4.716;2.367,6.8877,-3.6277;-4.4693,-2.0384,-.2921;-4.4867,-2.8602,-1.0294;-4.9943,-2.3675,.6191;-5.0606,-1.211,-.7287;-2.1664,-1.3544,-1.216;-2.2845,-.3168,-1.5811;-1.0886,-1.5055,-1.0349;-2.4453,-2.0207,-2.0468;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650075007428</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005604448628 0.000611405123 0.020435184962 0.005337064272</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030383378 -0.002379603 0.000054038 0.000216307 0.000263321 0.000361768 0.000367266 0.000411415 0.000568251 0.000690693 0.000876285 0.000918355 0.001004249 0.001048589 0.001190777 0.001239306 0.001480145 0.001530889 0.001687853 0.001728529 0.001819059 0.002061295 0.002241683 0.002452995 0.002475002 0.002902275 0.003007696 0.003221458 0.003404280 0.003554411 0.004033707 0.004223223 0.004602120 0.004665038 0.005504776 0.005545061 0.005657253 0.005994991 0.006566053 0.006826719 0.007461408 0.007814561 0.008466483 0.008891572 0.009153931 0.009551586 0.010031852 0.010823182 0.011013034 0.011285318 0.012191506 0.012547547 0.013312048 0.013457483 0.014292599 0.014765913 0.015084501 0.015339474 0.015581466 0.016018115 0.016379609 0.017057580 0.018174797 0.018546113 0.019002884 0.019982757 0.020679996 0.021002691 0.021468097 0.022092782 0.022844075 0.024488227 0.025065467 0.025929776 0.026488476 0.027359383 0.028811265 0.028890894 0.031047600 0.031531339 0.032837360 0.033549077 0.034500792 0.035481735 0.037707934 0.038464336 0.039486354 0.040093594 0.041025255 0.043576397 0.044381589 0.044701321 0.045835169 0.048540550 0.049259495 0.049827458 0.050546202 0.051051466 0.052240339 0.052357356 0.052489296 0.052664586 0.053906620 0.054175731 0.054875331 0.055176698 0.055954297 0.056370376 0.056504873 0.057218341 0.058446929 0.059585927 0.060749863 0.061198812 0.062127923 0.062276575 0.062849427 0.064241191 0.064968962 0.065805367 0.066073359 0.067186072 0.069664250 0.072027657 0.073867799 0.074936482 0.077062442 0.081562885 0.083859450 0.085512794 0.086377402 0.086493771 0.087603840 0.089968661 0.091189604 0.094011915 0.094521120 0.095845956 0.096162649 0.097433691 0.098117225 0.099288556 0.099836167 0.100467671 0.101283222 0.101525841 0.102409225 0.103096392 0.103219574 0.103867163 0.104977565 0.106637201 0.107484322 0.108688542 0.109729406 0.110849148 0.112172583 0.112889908 0.114106273 0.116381270 0.118565575 0.119036009 0.120371318 0.121613501 0.124905458 0.125872761 0.126507216 0.130862426 0.134392911 0.135221829 0.142059842 0.142619307 0.145424565 0.146589392 0.148525486 0.150653887 0.152483389 0.152947873 0.155328299 0.159546698 0.160637241 0.172514877 0.173181311 0.176194862 0.182998537 0.183756877 0.188478678 0.188883640 0.191711215 0.193476833 0.196843343 0.199253902 0.203140339 0.206414060 0.206758626 0.209633973 0.210161141 0.213104110 0.214487984 0.216774814 0.218596371 0.224495176 0.225242455 0.230134687 0.234367320 0.234611908 0.235220749 0.243855145 0.254994906 0.256715654 0.261474490 0.266617350 0.278476674 0.282672133 0.286094816 0.289021458 0.293352129 0.300584547 0.304670986 0.305274430 0.306876933 0.314177537 0.314780322 0.321738008 0.326946896 0.329657687 0.348601407 0.349019488 0.351301193 0.354655838 0.355789312 0.361403885 0.361800395 0.378425932 0.381271184 0.389566088 0.409102015 0.422677440 0.428258928 0.450520385 0.466624256 0.468928099 0.475635956 0.480771287 0.481371680 0.488446764 0.503229148 0.508995067 0.533531454 0.564980331 0.567798399 0.586041535 0.592230398 0.601807534 0.603817026 0.638805197 0.642031528 0.644962747 0.670745036 0.673885777 0.684083748 0.690750037 0.691281273 0.698548629 0.703889334 0.714641050 0.738859663 0.742285232 0.750593112 0.759647260 0.771883777 0.777096136 0.807145423 0.809933814 0.812975416 0.817871060 0.820395216 0.823529725 0.829671658 0.831850770 0.832059798 0.841581744 0.845030434 0.846323039 0.857638160 0.863868171 0.864664802 0.871225504 0.874569519 0.883036262 0.884272397 0.888635352 0.891676061 0.897149216 0.918614075 0.922407487 0.930873196 0.932865593 0.963894587 0.975387974 0.984063633 0.999645037 1.012116288 1.024677917 1.040271359 1.048439125 1.055413632 1.062349609 1.085607949 1.086552988 1.100144610 1.105163504 1.111897275 1.112944252 1.123108267 1.134040786 1.135047596 1.139470057 1.170580243 1.174922049 1.180366139 1.186007755 1.194076185 1.214777207 1.220587668 1.265536379 1.296551270 1.314025592 1.326357287 1.327039207 1.329735226 1.330918060 1.334798373 1.341666421 1.344610244 1.357426150 1.374965217 1.380964726 1.381936454 1.389568630 1.418746062 1.421330162 1.551068001 1.660083736 1.772417375</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">95</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34078291" y3="-0.02261309" z3="-0.1785426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37964562" y3="0.17293161" z3="0.43468773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62831376" y3="0.43147087" z3="-0.31788742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.6735605" y3="1.19392478" z3="-2.21285869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37194922" y3="0.34462488" z3="-1.16150192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68391236" y3="0.77175564" z3="-3.62036306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.55314302" y3="1.69001511" z3="-3.06169467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.26712069" y3="2.49532519" z3="-4.50731142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50131841" y3="1.15491638" z3="-4.31977241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.37733536" y3="2.81561015" z3="-5.05819253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93137374" y3="-0.55769405" z3="-3.44220491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09911495" y3="-0.09934514" z3="-0.98791819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.42039585" y3="-1.22460681" z3="-2.02059414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94722477" y3="-1.11567153" z3="-1.84072487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13515165" y3="-2.54511547" z3="-1.90110873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13953045" y3="-3.55383932" z3="0.62119923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.07530717" y3="-5.38894861" z3="-4.7336981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29412855" y3="-5.08536737" z3="-3.70629725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86523769" y3="-4.27800467" z3="-1.11321521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74731885" y3="-4.70701849" z3="-2.86051004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61502293" y3="-5.08741351" z3="-3.25377651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.90112244" y3="-4.67718232" z3="-1.95400403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47219399" y3="-4.31796005" z3="-1.54785073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78485225" y3="-4.69707418" z3="-3.20268258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42853084" y3="-5.38007597" z3="-3.92269642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9392067" y3="-4.64753886" z3="-1.61727138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03663988" y3="-3.78474787" z3="0.19419774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16717924" y3="-3.54174039" z3="0.84564378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06667026" y3="-3.99042519" z3="0.42156537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1513791" y3="-3.39463739" z3="2.31174016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19332337" y3="-3.18703482" z3="5.10863784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3537993" y3="-3.53905892" z3="3.01982007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.96906685" y3="-3.15598022" z3="3.02893476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.98751302" y3="-3.05281063" z3="4.41698107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37422314" y3="-3.43672066" z3="4.40787726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28020608" y3="-3.74092543" z3="2.47574676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.00436725" y3="-3.07684476" z3="2.52175287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.04798694" y3="-2.89025291" z3="4.95367529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31816306" y3="-3.55937877" z3="4.94623496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20720412" y3="-3.11444045" z3="6.19969801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40983182" y3="-3.98011628" z3="-0.65066246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18448562" y3="-3.51317365" z3="-1.11282088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50030858" y3="0.12788517" z3="-4.70909102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04693853" y3="-1.60243715" z3="-0.01546242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.81882931" y3="-0.83863707" z3="1.12749575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.72623181" y3="-0.22508384" z3="1.4226231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.22470435" y3="0.60804366" z3="1.14471745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.22939916" y3="1.44993159" z3="-0.51340986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.07987603" y3="-0.68093931" z3="1.4165734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.22278516" y3="1.85607221" z3="2.5431821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.77210488" y3="-0.77635083" z3="2.0463688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.48755585" y3="-0.15428535" z3="3.29036979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.05867816" y3="0.71176004" z3="-1.31720445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.60982523" y3="2.16917588" z3="-0.53985621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.16515455" y3="2.01191629" z3="-0.68777294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.04076297" y3="-1.03540796" z3="2.45984494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.07650136" y3="-0.2503352" z3="1.22727073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.96596175" y3="-1.52485988" z3="0.71651302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.31926715" y3="1.35739616" z3="3.52401769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.72796401" y3="2.42110582" z3="2.54514907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.0451209" y3="2.58731488" z3="2.44131617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.63311833" y3="-0.64081524" z3="3.78952731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.39552319" y3="-0.27957995" z3="3.89678102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.27386999" y3="0.91823593" z3="3.14977371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.87095007" y3="-0.81047209" z3="0.9952511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41266516" y3="-2.12413543" z3="0.83184298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76723855" y3="-2.78223149" z3="1.87122931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59931201" y3="-2.1155004" z3="3.08141672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.11965238" y3="-0.84395296" z3="3.30255547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.76328506" y3="-0.19833332" z3="2.25143842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4848577" y3="-2.59981994" z3="-0.14842016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34324866" y3="-3.77713091" z3="1.72923334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73859267" y3="-2.71725024" z3="4.10494723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.97225995" y3="-0.35622451" z3="4.26673426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.13312189" y3="0.82179123" z3="2.38704025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83650826" y3="0.31523342" z3="-4.33184089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79176658" y3="-0.66291478" z3="-4.5716472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39813627" y3="-1.83546674" z3="-5.20559283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.08872396" y3="-2.03597405" z3="-5.63237183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85786646" y3="-1.05273196" z3="-5.37676867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.11880493" y3="1.2218881" z3="-3.79065043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82793356" y3="-0.54248274" z3="-4.25082277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.38779786" y3="-2.89601349" z3="-5.40881666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17786846" y3="-2.96280179" z3="-6.14082393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89387101" y3="-1.21511341" z3="-5.6758104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.4494393" y3="-2.04032021" z3="5.07235581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32243693" y3="-3.84038768" z3="3.91167227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.10203616" y3="-3.8008392" z3="-6.16359131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43512195" y3="-2.81681379" z3="-4.79820596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.01835643" y3="1.20459308" z3="-1.44507215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.03962638" y3="1.58063408" z3="-2.41073578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.36995823" y3="1.6055045" z3="-1.63054745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.74665554" y3="2.33024034" z3="-2.73501724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.11025526" y3="1.31658543" z3="-0.87809999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.7903695" y3="2.62907892" z3="-2.86933551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4657866" y3="2.31328681" z3="-3.55342029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.78196061" y3="2.67794927" z3="-3.71085154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73125595" y3="2.57887339" z3="-4.31727016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08770746" y3="3.23546621" z3="-4.6008945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.26063944" y3="3.08891827" z3="-3.19755995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.12701191" y3="3.48477269" z3="-3.9663152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.02025294" y3="4.1080466" z3="-2.55494875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.7020822" y3="5.43798617" z3="-2.71000649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.86289404" y3="3.82902631" z3="-1.92070611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.30330647" y3="6.19874691" z3="-2.20591403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.83515665" y3="4.86750234" z3="-4.12506612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.60719343" y3="5.82759907" z3="-3.51695611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.9708575" y3="5.15205835" z3="-4.73277994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.37774067" y3="6.8839943" z3="-3.64812423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46655745" y3="-2.03786438" z3="-0.29379856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.48048381" y3="-2.8569672" z3="-1.03192445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99318745" y3="-2.36898303" z3="0.6147186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05752166" y3="-1.21035052" z3="-0.73048927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16326316" y3="-1.35516162" z3="-1.21179894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28052585" y3="-0.31831859" z3="-1.57924155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08607565" y3="-1.50504545" z3="-1.02910939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43976118" y3="-2.02243007" z3="-2.04208713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,-.0226,-.1785;7.3796,.1729,.4347;6.6283,.4315,-.3179;4.6736,1.1939,-2.2129;4.3719,.3446,-1.1615;2.6839,.7718,-3.6204;3.5531,1.69,-3.0617;1.2671,2.4953,-4.5073;1.5013,1.1549,-4.3198;.3773,2.8156,-5.0582;2.9314,-.5577,-3.4422;3.0991,-.0993,-.9879;2.4204,-1.2246,-2.0206;.9472,-1.1157,-1.8407;3.1352,-2.5451,-1.9011;-.1395,-3.5538,.6212;-.0753,-5.3889,-4.7337;-.2941,-5.0854,-3.7063;-.8652,-4.278,-1.1132;.7473,-4.707,-2.8605;-1.615,-5.0874,-3.2538;-1.9011,-4.6772,-1.954;.4722,-4.318,-1.5479;1.7849,-4.6971,-3.2027;-2.4285,-5.3801,-3.9227;-2.9392,-4.6475,-1.6173;-1.0366,-3.7847,.1942;-2.1672,-3.5417,.8456;-3.0667,-3.9904,.4216;-2.1514,-3.3946,2.3117;-2.1933,-3.187,5.1086;-3.3538,-3.5391,3.0198;-.9691,-3.156,3.0289;-.9875,-3.0528,4.417;-3.3742,-3.4367,4.4079;-4.2802,-3.7409,2.4757;-.0044,-3.0768,2.5218;-.048,-2.8903,4.9537;-4.3182,-3.5594,4.9462;-2.2072,-3.1144,6.1997;1.4098,-3.9801,-.6507;2.1845,-3.5132,-1.1128;.5003,.1279,-4.7091;-3.0469,-1.6024,-.0155;-2.8188,-.8386,1.1275;-1.7262,-.2251,1.4226;-.2247,.608,1.1447;-.2294,1.4499,-.5134;1.0799,-.6809,1.4166;-.2228,1.8561,2.5432;-3.7721,-.7764,2.0464;-3.4876,-.1543,3.2904;-.0587,.7118,-1.3172;.6098,2.1692,-.5399;-1.1652,2.0119,-.6878;1.0408,-1.0354,2.4598;2.0765,-.2503,1.2273;.966,-1.5249,.7165;-.3193,1.3574,3.524;.728,2.4211,2.5451;-1.0451,2.5873,2.4413;-2.6331,-.6408,3.7895;-4.3955,-.2796,3.8968;-3.2739,.9182,3.1498;4.871,-.8105,.9953;4.4127,-2.1241,.8318;3.7672,-2.7822,1.8712;3.5993,-2.1155,3.0814;4.1197,-.844,3.3026;4.7633,-.1983,2.2514;4.4849,-2.5998,-.1484;3.3432,-3.7771,1.7292;2.7386,-2.7173,4.1049;3.9723,-.3562,4.2667;5.1331,.8218,2.387;-.8365,.3152,-4.3318;-1.7918,-.6629,-4.5716;-1.3981,-1.8355,-5.2056;-.0887,-2.036,-5.6324;.8579,-1.0527,-5.3768;-1.1188,1.2219,-3.7907;-2.8279,-.5425,-4.2508;-2.3878,-2.896,-5.4088;.1779,-2.9628,-6.1408;1.8939,-1.2151,-5.6758;2.4494,-2.0403,5.0724;2.3224,-3.8404,3.9117;-2.102,-3.8008,-6.1636;-3.4351,-2.8168,-4.7982;7.0184,1.2046,-1.4451;6.0396,1.5806,-2.4107;8.37,1.6055,-1.6305;8.7467,2.3302,-2.735;9.1103,1.3166,-.8781;9.7904,2.6291,-2.8693;6.4658,2.3133,-3.5534;7.782,2.6779,-3.7109;5.7313,2.5789,-4.3173;8.0877,3.2355,-4.6009;3.2606,3.0889,-3.1976;2.127,3.4848,-3.9663;4.0203,4.108,-2.5549;3.7021,5.438,-2.71;4.8629,3.829,-1.9207;4.3033,6.1987,-2.2059;1.8352,4.8675,-4.1251;2.6072,5.8276,-3.517;.9709,5.1521,-4.7328;2.3777,6.884,-3.6481;-4.4666,-2.0379,-.2938;-4.4805,-2.857,-1.0319;-4.9932,-2.369,.6147;-5.0575,-1.2104,-.7305;-2.1633,-1.3552,-1.2118;-2.2805,-.3183,-1.5792;-1.0861,-1.505,-1.0291;-2.4398,-2.0224,-2.0421;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650058969131</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006809107408 0.000756744611 0.019065778023 0.005337419072</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030384048 -0.003350511 0.000049344 0.000216744 0.000266445 0.000360332 0.000363138 0.000411334 0.000574267 0.000692191 0.000876566 0.000919847 0.001004294 0.001051574 0.001204274 0.001239457 0.001482188 0.001536915 0.001687644 0.001729322 0.001820098 0.002058311 0.002245052 0.002459491 0.002492494 0.002903400 0.003007830 0.003225835 0.003406243 0.003553768 0.004040929 0.004243488 0.004637895 0.004677479 0.005523589 0.005551339 0.005713082 0.005994937 0.006565978 0.006828220 0.007468445 0.007819903 0.008480890 0.008919090 0.009176038 0.009556939 0.010041906 0.010867369 0.011025872 0.011278654 0.012193075 0.012580704 0.013314633 0.013455122 0.014309637 0.014776706 0.015088320 0.015365037 0.015593321 0.016032622 0.016467011 0.017057222 0.018174518 0.018547840 0.019005718 0.020001696 0.020690299 0.021007318 0.021568209 0.022106003 0.022860437 0.024499620 0.025070816 0.025949213 0.026489213 0.027575681 0.028813715 0.028970435 0.031089114 0.031531506 0.032838414 0.033552466 0.034546913 0.035524040 0.037705569 0.038473883 0.039502146 0.040117215 0.041037294 0.043587041 0.044394971 0.044703113 0.045865636 0.048544594 0.049262062 0.049827243 0.050555576 0.051060583 0.052272799 0.052357389 0.052529372 0.052664528 0.053915287 0.054177012 0.054877099 0.055179608 0.055996658 0.056370286 0.056525826 0.057217697 0.058492780 0.059645541 0.060749856 0.061200005 0.062149328 0.062333257 0.062906762 0.064277973 0.064970384 0.065806334 0.066173035 0.067319701 0.069689380 0.072031501 0.073874124 0.074950272 0.077083392 0.081878251 0.083957985 0.085518441 0.086490053 0.086593340 0.087780086 0.089971460 0.091348695 0.094025953 0.094522202 0.095850355 0.096307970 0.097433863 0.098138036 0.099290583 0.099912628 0.100747622 0.101284737 0.101526831 0.102468095 0.103131457 0.103320204 0.103886799 0.105044470 0.106646949 0.107581428 0.108690385 0.109733253 0.110876080 0.112203026 0.112970052 0.114106904 0.116412936 0.118703080 0.119086508 0.120763449 0.121709545 0.124916304 0.125885842 0.126511367 0.130914171 0.134389752 0.135268353 0.142079689 0.142763341 0.145441681 0.146595646 0.148713708 0.150664500 0.152482978 0.152949721 0.155474118 0.159566023 0.160641347 0.172615669 0.173181350 0.176307490 0.183154518 0.183758145 0.188483364 0.188883993 0.191712081 0.193475275 0.196920182 0.199253895 0.203278688 0.206421211 0.206759103 0.209635036 0.210169951 0.213158936 0.214542139 0.216827360 0.218603517 0.224511414 0.225305746 0.230282168 0.234381576 0.234611867 0.235268702 0.243868401 0.255013500 0.256718385 0.261508551 0.266618811 0.278485341 0.282689491 0.286095248 0.289060116 0.293401132 0.300595541 0.304738669 0.305302712 0.306880003 0.314178584 0.314786064 0.321744280 0.326946297 0.329674999 0.348600907 0.349329419 0.351312509 0.354669563 0.355867345 0.361458191 0.361800945 0.378425576 0.381320358 0.389570950 0.409138502 0.422677195 0.428268283 0.450522891 0.466652728 0.468964630 0.475636723 0.480772911 0.481371454 0.488616903 0.503501327 0.509053131 0.533583927 0.565053439 0.568020017 0.586123847 0.592240302 0.601816922 0.603897604 0.639059719 0.642476458 0.644984352 0.670747643 0.674079467 0.684167058 0.690761889 0.691282048 0.698565664 0.703893972 0.714657023 0.739019763 0.742284362 0.750707860 0.759725141 0.771883765 0.777223942 0.807573766 0.809935606 0.812991523 0.817872694 0.820443984 0.823537145 0.829703142 0.831906193 0.832072377 0.841708583 0.845032417 0.846326365 0.857644963 0.863905764 0.864667105 0.871318292 0.874594035 0.883037717 0.884270630 0.888668122 0.891677066 0.897436694 0.918731431 0.922414370 0.930873072 0.932865700 0.963936750 0.975395178 0.984165477 0.999645584 1.012169168 1.024766868 1.040274914 1.048439848 1.055413661 1.062630894 1.085608589 1.086585777 1.100177483 1.105185072 1.111922940 1.113083966 1.123109105 1.135008594 1.137167975 1.139884501 1.170590386 1.175039695 1.180588821 1.186018140 1.194081297 1.214791347 1.220624591 1.265537309 1.296745382 1.314048335 1.326454644 1.327065644 1.329736314 1.331002992 1.334851725 1.341679365 1.344622894 1.357702270 1.374966060 1.380980306 1.381961332 1.389578995 1.418754175 1.421330550 1.551075531 1.660083627 1.772429910</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">96</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33943194" y3="-0.01996086" z3="-0.17988575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37736926" y3="0.17746616" z3="0.43635827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62693551" y3="0.43624284" z3="-0.31695273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67433691" y3="1.19709923" z3="-2.21456816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37156419" y3="0.34733702" z3="-1.16383482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68718727" y3="0.77286172" z3="-3.6261839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.55506338" y3="1.69241624" z3="-3.06533658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.27123003" y3="2.49682729" z3="-4.51620729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50571288" y3="1.1546822" z3="-4.32885535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.38218211" y3="2.8178328" z3="-5.06753789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93296884" y3="-0.55546289" z3="-3.44543416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09863345" y3="-0.09602777" z3="-0.99158917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41946178" y3="-1.22061702" z3="-2.02447552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94621619" y3="-1.10986875" z3="-1.84693377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.131735" y3="-2.54207936" z3="-1.90297567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14194347" y3="-3.55783312" z3="0.62837197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.07846712" y3="-5.38045511" z3="-4.73092974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29651772" y3="-5.08074309" z3="-3.702676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86690276" y3="-4.2802528" z3="-1.10734659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74301087" y3="-4.69764566" z3="-2.85808989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61573178" y3="-5.090816" z3="-3.24791535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.9014211" y3="-4.68441917" z3="-1.94702189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47054962" y3="-4.31521104" z3="-1.54395104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77955414" y3="-4.68134864" z3="-3.20106737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42590564" y3="-5.38845649" z3="-3.91613049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.94017342" y3="-4.65801907" z3="-1.60817426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03902786" y3="-3.78811035" z3="0.20042464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1699056" y3="-3.54355026" z3="0.85069757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06971008" y3="-3.99138977" z3="0.42637132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15469076" y3="-3.396081" z3="2.3169181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.1987796" y3="-3.18551651" z3="5.11374971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35784756" y3="-3.53746008" z3="3.02416608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9730019" y3="-3.1594322" z3="3.03506638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99258001" y3="-3.05457792" z3="4.42298673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37943956" y3="-3.43354346" z3="4.4120769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28488791" y3="-3.73697834" z3="2.47936648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0084594" y3="-3.08248569" z3="2.52910688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.05364715" y3="-2.89290932" z3="4.96000072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32415441" y3="-3.55333563" z3="4.94961687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21410266" y3="-3.11082158" z3="6.20462855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41118294" y3="-3.97765057" z3="-0.64752289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17908548" y3="-3.50675551" z3="-1.10938655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50343324" y3="0.12989028" z3="-4.71340201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04648142" y3="-1.60440394" z3="-0.0134455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.81939861" y3="-0.83857257" z3="1.12988765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.72609797" y3="-0.22473578" z3="1.42590903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.22384092" y3="0.60273332" z3="1.14614214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.23245659" y3="1.45016202" z3="-0.50867479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.07576698" y3="-0.69390199" z3="1.40992987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.21152412" y3="1.84321509" z3="2.55047687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.77446894" y3="-0.77393868" z3="2.04736972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.49388356" y3="-0.15231489" z3="3.29129693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.05877588" y3="0.7180398" z3="-1.31392214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.60843846" y3="2.16965773" z3="-0.53438363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.16805369" y3="2.00808224" z3="-0.68057531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03723942" y3="-1.05297836" z3="2.45277587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0757165" y3="-0.26776121" z3="1.21973878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.95496863" y3="-1.53564999" z3="0.70777289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.30362773" y3="1.33991262" z3="3.52858237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.73927931" y3="2.40585433" z3="2.5514067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.0321189" y3="2.5756539" z3="2.45694665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.64120168" y3="-0.63796622" z3="3.79279035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.40236768" y3="-0.27876053" z3="3.89427272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.28046927" y3="0.91987094" z3="3.1512268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86911334" y3="-0.80978039" z3="0.99250137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4125196" y3="-2.12383504" z3="0.82684003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76728785" y3="-2.7842798" z3="1.86484022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59794018" y3="-2.11952962" z3="3.0759883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.11654925" y3="-0.84754032" z3="3.29934758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.75970379" y3="-0.1994688" z3="2.24944692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48638608" y3="-2.59830274" z3="-0.15344364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34427379" y3="-3.77950577" z3="1.72067955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73731263" y3="-2.7236541" z3="4.09826892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.96813532" y3="-0.3614847" z3="4.26420181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.12831077" y3="0.8209804" z3="2.3870385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83273382" y3="0.31688715" z3="-4.33372179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78833765" y3="-0.66220442" z3="-4.5708646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39626043" y3="-1.8352141" z3="-5.20431721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.08745222" y3="-2.03555445" z3="-5.63334511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85928963" y3="-1.05108228" z3="-5.37866061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.11569736" y3="1.22399622" z3="-3.79290452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82064237" y3="-0.53748727" z3="-4.24902947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.38559574" y3="-2.89651101" z3="-5.40493795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17920292" y3="-2.96269217" z3="-6.14087356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89628571" y3="-1.21176348" z3="-5.68032814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.45146408" y3="-2.05009254" z3="5.06943919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31790368" y3="-3.84520861" z3="3.90036443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.10056545" y3="-3.80237657" z3="-6.15901829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43174407" y3="-2.81629607" z3="-4.79317617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0181949" y3="1.21103191" z3="-1.44293873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04063577" y3="1.58558007" z3="-2.41033859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.36953285" y3="1.61336315" z3="-1.62600792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.74714829" y3="2.33764387" z3="-2.72992079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.10897091" y3="1.32543288" z3="-0.87228324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79046955" y3="2.63721504" z3="-2.86236619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46804632" y3="2.31819978" z3="-3.55252167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.78373443" y3="2.68346836" z3="-3.70775103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73457794" y3="2.58199556" z3="-4.31806518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09030004" y3="3.24084059" z3="-4.59736119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.26253786" y3="3.09198016" z3="-3.20275121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.13109543" y3="3.48740736" z3="-3.97479411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.02203083" y3="4.11093442" z3="-2.56180292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.71054731" y3="5.43716049" z3="-2.72658222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.86201777" y3="3.83264796" z3="-1.9235213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.30700496" y3="6.2011994" z3="-2.21649544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.84242225" y3="4.86942347" z3="-4.13826295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.61725347" y3="5.82725782" z3="-3.53602189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.97802775" y3="5.15540965" z3="-4.74574112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.37333669" y3="6.89298269" z3="-3.65498087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46590551" y3="-2.03979661" z3="-0.29470394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47969016" y3="-2.85993736" z3="-1.033782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99445764" y3="-2.37114883" z3="0.61352875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05593554" y3="-1.21174626" z3="-0.7317806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15996525" y3="-1.3567282" z3="-1.20699765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27677027" y3="-0.31955937" z3="-1.57446471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08352932" y3="-1.50682551" z3="-1.02054208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43380774" y3="-2.02380406" z3="-2.03817045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3394,-.02,-.1799;7.3774,.1775,.4364;6.6269,.4362,-.317;4.6743,1.1971,-2.2146;4.3716,.3473,-1.1638;2.6872,.7729,-3.6262;3.5551,1.6924,-3.0653;1.2712,2.4968,-4.5162;1.5057,1.1547,-4.3289;.3822,2.8178,-5.0675;2.933,-.5555,-3.4454;3.0986,-.096,-.9916;2.4195,-1.2206,-2.0245;.9462,-1.1099,-1.8469;3.1317,-2.5421,-1.903;-.1419,-3.5578,.6284;-.0785,-5.3805,-4.7309;-.2965,-5.0807,-3.7027;-.8669,-4.2803,-1.1073;.743,-4.6976,-2.8581;-1.6157,-5.0908,-3.2479;-1.9014,-4.6844,-1.947;.4705,-4.3152,-1.544;1.7796,-4.6813,-3.2011;-2.4259,-5.3885,-3.9161;-2.9402,-4.658,-1.6082;-1.039,-3.7881,.2004;-2.1699,-3.5436,.8507;-3.0697,-3.9914,.4264;-2.1547,-3.3961,2.3169;-2.1988,-3.1855,5.1137;-3.3578,-3.5375,3.0242;-.973,-3.1594,3.0351;-.9926,-3.0546,4.423;-3.3794,-3.4335,4.4121;-4.2849,-3.737,2.4794;-.0085,-3.0825,2.5291;-.0536,-2.8929,4.96;-4.3242,-3.5533,4.9496;-2.2141,-3.1108,6.2046;1.4112,-3.9777,-.6475;2.1791,-3.5068,-1.1094;.5034,.1299,-4.7134;-3.0465,-1.6044,-.0134;-2.8194,-.8386,1.1299;-1.7261,-.2247,1.4259;-.2238,.6027,1.1461;-.2325,1.4502,-.5087;1.0758,-.6939,1.4099;-.2115,1.8432,2.5505;-3.7745,-.7739,2.0474;-3.4939,-.1523,3.2913;-.0588,.718,-1.3139;.6084,2.1697,-.5344;-1.1681,2.0081,-.6806;1.0372,-1.053,2.4528;2.0757,-.2678,1.2197;.955,-1.5356,.7078;-.3036,1.3399,3.5286;.7393,2.4059,2.5514;-1.0321,2.5757,2.4569;-2.6412,-.638,3.7928;-4.4024,-.2788,3.8943;-3.2805,.9199,3.1512;4.8691,-.8098,.9925;4.4125,-2.1238,.8268;3.7673,-2.7843,1.8648;3.5979,-2.1195,3.076;4.1165,-.8475,3.2993;4.7597,-.1995,2.2494;4.4864,-2.5983,-.1534;3.3443,-3.7795,1.7207;2.7373,-2.7237,4.0983;3.9681,-.3615,4.2642;5.1283,.821,2.387;-.8327,.3169,-4.3337;-1.7883,-.6622,-4.5709;-1.3963,-1.8352,-5.2043;-.0875,-2.0356,-5.6333;.8593,-1.0511,-5.3787;-1.1157,1.224,-3.7929;-2.8206,-.5375,-4.249;-2.3856,-2.8965,-5.4049;.1792,-2.9627,-6.1409;1.8963,-1.2118,-5.6803;2.4515,-2.0501,5.0694;2.3179,-3.8452,3.9004;-2.1006,-3.8024,-6.159;-3.4317,-2.8163,-4.7932;7.0182,1.211,-1.4429;6.0406,1.5856,-2.4103;8.3695,1.6134,-1.626;8.7471,2.3376,-2.7299;9.109,1.3254,-.8723;9.7905,2.6372,-2.8624;6.468,2.3182,-3.5525;7.7837,2.6835,-3.7078;5.7346,2.582,-4.3181;8.0903,3.2408,-4.5974;3.2625,3.092,-3.2028;2.1311,3.4874,-3.9748;4.022,4.1109,-2.5618;3.7105,5.4372,-2.7266;4.862,3.8326,-1.9235;4.307,6.2012,-2.2165;1.8424,4.8694,-4.1383;2.6173,5.8273,-3.536;.978,5.1554,-4.7457;2.3733,6.893,-3.655;-4.4659,-2.0398,-.2947;-4.4797,-2.8599,-1.0338;-4.9945,-2.3711,.6135;-5.0559,-1.2117,-.7318;-2.16,-1.3567,-1.207;-2.2768,-.3196,-1.5745;-1.0835,-1.5068,-1.0205;-2.4338,-2.0238,-2.0382;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650046276136</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010589515080 0.000930674756 0.022394249890 0.005337300620</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030384061 -0.004534752 0.000049528 0.000216751 0.000262812 0.000360519 0.000363472 0.000416738 0.000573396 0.000691409 0.000876032 0.000944422 0.001005159 0.001055955 0.001203691 0.001241435 0.001488626 0.001539525 0.001687831 0.001734945 0.001821483 0.002057276 0.002251957 0.002463859 0.002495723 0.002910747 0.003010837 0.003238057 0.003407450 0.003554012 0.004047087 0.004241780 0.004638583 0.004734850 0.005523241 0.005558448 0.005773905 0.005994678 0.006569560 0.006829288 0.007477266 0.007835016 0.008483756 0.008927286 0.009174432 0.009554686 0.010041612 0.010889068 0.011052628 0.011320696 0.012210451 0.012588594 0.013331193 0.013477434 0.014307046 0.014780344 0.015087271 0.015371777 0.015590996 0.016036912 0.016491263 0.017077110 0.018183367 0.018547608 0.019039894 0.020010631 0.020707877 0.021010645 0.021636499 0.022117516 0.022860990 0.024512288 0.025083658 0.025961871 0.026493905 0.027800929 0.028822986 0.029204664 0.031161101 0.031531647 0.032841668 0.033561106 0.034541322 0.035575311 0.037706907 0.038473380 0.039513139 0.040136836 0.041040721 0.043662417 0.044391628 0.044705496 0.046020845 0.048587589 0.049272342 0.049833675 0.050571157 0.051060262 0.052298563 0.052358147 0.052594802 0.052673364 0.053918327 0.054180610 0.054881707 0.055179544 0.056087325 0.056372699 0.056544478 0.057232739 0.058592857 0.059663245 0.060751221 0.061200025 0.062166429 0.062563275 0.062899132 0.064324773 0.064971060 0.065809229 0.066231589 0.067597689 0.069713466 0.072031654 0.073880480 0.074971187 0.077093062 0.082214490 0.084122152 0.085526828 0.086491029 0.086771381 0.088211460 0.089978646 0.091541896 0.094058250 0.094523232 0.095873842 0.096409534 0.097433909 0.098152739 0.099293110 0.099938546 0.101118090 0.101285145 0.101603980 0.102556360 0.103150730 0.103577567 0.103992387 0.105262015 0.106648207 0.107809831 0.108700114 0.109753319 0.110873227 0.112233360 0.113092352 0.114109592 0.116420324 0.118768679 0.119247194 0.121134216 0.121933360 0.124915737 0.125936133 0.126537257 0.130938589 0.134410535 0.135277984 0.142097417 0.142860168 0.145439567 0.146593990 0.148893731 0.150676957 0.152504877 0.152950026 0.155693914 0.159582265 0.160659737 0.172658969 0.173182918 0.176525241 0.183335305 0.183784765 0.188483255 0.188882494 0.191738205 0.193484516 0.197060164 0.199278703 0.203295881 0.206442163 0.206760281 0.209635016 0.210188165 0.213238526 0.214642913 0.216840123 0.218604284 0.224510022 0.225420227 0.230579834 0.234381179 0.234621054 0.235282069 0.243875197 0.255034587 0.256729528 0.261515881 0.266623255 0.278485429 0.282688447 0.286096241 0.289091159 0.293518734 0.300614967 0.304834879 0.305314404 0.306896723 0.314181226 0.314792740 0.321751561 0.326952264 0.329694799 0.348637901 0.349350227 0.351392989 0.354671898 0.356000735 0.361534558 0.361801672 0.378427362 0.381706323 0.389592128 0.409140243 0.422706833 0.428268090 0.450523425 0.466683366 0.468971987 0.475637479 0.480775575 0.481381126 0.488721278 0.503906865 0.509376908 0.533647832 0.565218884 0.568526113 0.586292480 0.592246056 0.601853522 0.604153878 0.639143999 0.642911815 0.645012500 0.670747826 0.674318039 0.684199532 0.690785209 0.691284173 0.698609449 0.703898117 0.714717615 0.739375065 0.742331357 0.750871291 0.759827495 0.771883860 0.777461971 0.807983852 0.809937503 0.813010150 0.817873723 0.820556698 0.823577211 0.829790101 0.831990540 0.832101795 0.841827580 0.845038874 0.846326905 0.857644863 0.863910971 0.864670109 0.871452196 0.874612119 0.883059187 0.884351318 0.888676823 0.891685569 0.897859522 0.918805522 0.922426892 0.930878923 0.932882753 0.963991293 0.975418301 0.984297436 0.999645606 1.012201043 1.024828369 1.040286060 1.048439924 1.055415448 1.063042711 1.085610919 1.086661891 1.100296080 1.105216126 1.111948906 1.113265817 1.123111311 1.135016148 1.139070020 1.144280011 1.170597092 1.175122772 1.180825685 1.186090108 1.194090229 1.214791461 1.220690930 1.265596481 1.296932078 1.314063734 1.326606336 1.327215327 1.329748533 1.331155689 1.334855412 1.341685014 1.344622655 1.357734957 1.374970572 1.380980644 1.381969873 1.389624361 1.418760813 1.421332349 1.551085269 1.660083860 1.772435576</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">97</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33789537" y3="-0.01571916" z3="-0.18139942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37470864" y3="0.18091969" z3="0.43802065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62536477" y3="0.43971375" z3="-0.31643869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67605176" y3="1.20065115" z3="-2.2175847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37141569" y3="0.35239415" z3="-1.16644029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69058145" y3="0.77598591" z3="-3.63109119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.55871988" y3="1.69513046" z3="-3.07159838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.27686664" y3="2.49927447" z3="-4.52516891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.50966013" y3="1.15837962" z3="-4.33397295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.38763393" y3="2.81993606" z3="-5.07687135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93609306" y3="-0.55276803" z3="-3.44854576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0979281" y3="-0.08988155" z3="-0.9951836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41838895" y3="-1.21476578" z3="-2.02756551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94503072" y3="-1.10091305" z3="-1.85327101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12864392" y3="-2.53694934" z3="-1.90240735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14332078" y3="-3.56255831" z3="0.63596503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.08011264" y3="-5.37483235" z3="-4.72840765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29769897" y3="-5.07770887" z3="-3.6989707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86731886" y3="-4.28295981" z3="-1.10144595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74285792" y3="-4.69261005" z3="-2.85539364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61745989" y3="-5.09192779" z3="-3.24218164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.90315893" y3="-4.68767791" z3="-1.94032259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.46966097" y3="-4.31201939" z3="-1.54014156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77937523" y3="-4.67244296" z3="-3.20136016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42868062" y3="-5.39165209" z3="-3.90948966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.94141175" y3="-4.6656339" z3="-1.60000157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03980734" y3="-3.79295865" z3="0.20716705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17117987" y3="-3.54729196" z3="0.85621291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0711576" y3="-3.99386134" z3="0.430747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15802221" y3="-3.39883238" z3="2.32219076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20437089" y3="-3.1853458" z3="5.11876447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36240633" y3="-3.53712121" z3="3.02833625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97664238" y3="-3.16367018" z3="3.04127347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99714487" y3="-3.05735691" z3="4.42901754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38495855" y3="-3.43191413" z3="4.41616278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28892089" y3="-3.73588758" z3="2.48298772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01078242" y3="-3.09070001" z3="2.53599342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.05763736" y3="-2.89755958" z3="4.96638665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33023619" y3="-3.54986866" z3="4.95298152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22015211" y3="-3.11011047" z3="6.20966512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40750261" y3="-3.96995456" z3="-0.64466484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17860445" y3="-3.50063609" z3="-1.10824594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50662823" y3="0.13186266" z3="-4.71800676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0447348" y3="-1.60706697" z3="-0.00975602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.82146513" y3="-0.84147999" z3="1.13381216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.73391483" y3="-0.22287473" z3="1.43359592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.22570945" y3="0.59503535" z3="1.1493418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.23508615" y3="1.44864737" z3="-0.50296368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.07034867" y3="-0.70567194" z3="1.4026198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.20248134" y3="1.83090606" z3="2.55784771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.77789425" y3="-0.78054772" z3="2.04899459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.50289208" y3="-0.15476978" z3="3.29147348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.0643754" y3="0.7178289" z3="-1.31222587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.60458486" y3="2.16783392" z3="-0.52668868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.17114654" y3="2.01424956" z3="-0.67268246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03769593" y3="-1.06546219" z3="2.44410726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.06695187" y3="-0.27905267" z3="1.20778313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.94612372" y3="-1.54466273" z3="0.69864777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.29407755" y3="1.32428986" z3="3.53526255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.75284218" y3="2.38816494" z3="2.55591669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.01970201" y3="2.56993591" z3="2.46986015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.65157537" y3="-0.63587331" z3="3.79770535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.41296076" y3="-0.28191323" z3="3.89215723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.29076027" y3="0.91756591" z3="3.14888706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86678132" y3="-0.80757566" z3="0.98951733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41408913" y3="-2.12264537" z3="0.82306429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76842448" y3="-2.78511542" z3="1.85960409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59579465" y3="-2.12168555" z3="3.07075023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.11096698" y3="-0.84876466" z3="3.29517444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.75379391" y3="-0.19849366" z3="2.24647155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49041181" y3="-2.59652931" z3="-0.1572825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3474759" y3="-3.78086358" z3="1.71430296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73486696" y3="-2.72783716" z3="4.09165951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.96013079" y3="-0.36381285" z3="4.25998039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.11968832" y3="0.82253515" z3="2.38481688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82793706" y3="0.32052549" z3="-4.33534623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78361263" y3="-0.65835881" z3="-4.56850158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39270661" y3="-1.83226791" z3="-5.20219487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.08590753" y3="-2.03392463" z3="-5.63412284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.86153813" y3="-1.04987856" z3="-5.38424857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.1076615" y3="1.22815494" z3="-3.79573287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81932545" y3="-0.5386081" z3="-4.24281693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.3828076" y3="-2.89319198" z3="-5.3980046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17912918" y3="-2.96166122" z3="-6.14214703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89700515" y3="-1.2118852" z3="-5.68635018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.450572" y3="-2.05723574" z3="5.06488348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31368153" y3="-3.84790571" z3="3.89071695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.1000459" y3="-3.80032846" z3="-6.15101919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42764074" y3="-2.81221951" z3="-4.78374808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.01820721" y3="1.21413367" z3="-1.44164311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04243279" y3="1.58797279" z3="-2.41104093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.36959813" y3="1.61726939" z3="-1.62217407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.74888477" y3="2.34140894" z3="-2.72573434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.10774501" y3="1.33088181" z3="-0.86663222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79227834" y3="2.64171384" z3="-2.85628127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47161408" y3="2.3198996" z3="-3.552894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.78741379" y3="2.68623465" z3="-3.70572093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73961794" y3="2.5836452" z3="-4.3197499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09523312" y3="3.24308193" z3="-4.59516369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.26759602" y3="3.0945351" z3="-3.2118743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.13610374" y3="3.49072436" z3="-3.98407277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.02697257" y3="4.1145735" z3="-2.57131425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.7104047" y3="5.44535905" z3="-2.73152282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.86879862" y3="3.83500817" z3="-1.9355054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.31382116" y3="6.20478172" z3="-2.23182013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.84494596" y3="4.87499741" z3="-4.14681506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.61597309" y3="5.83683558" z3="-3.53935662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.98259136" y3="5.15942705" z3="-4.75763486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.39106361" y3="6.89159137" z3="-3.67737512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4646707" y3="-2.04253608" z3="-0.29325022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47723746" y3="-2.86249636" z3="-1.03225687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99544078" y3="-2.37355578" z3="0.61381025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05354523" y3="-1.21421996" z3="-0.73153362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15620054" y3="-1.359914" z3="-1.20275807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27267837" y3="-0.32312188" z3="-1.57060021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07938075" y3="-1.50961859" z3="-1.01562887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42898626" y3="-2.02761311" z3="-2.03431897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3379,-.0157,-.1814;7.3747,.1809,.438;6.6254,.4397,-.3164;4.6761,1.2007,-2.2176;4.3714,.3524,-1.1664;2.6906,.776,-3.6311;3.5587,1.6951,-3.0716;1.2769,2.4993,-4.5252;1.5097,1.1584,-4.334;.3876,2.8199,-5.0769;2.9361,-.5528,-3.4485;3.0979,-.0899,-.9952;2.4184,-1.2148,-2.0276;.945,-1.1009,-1.8533;3.1286,-2.5369,-1.9024;-.1433,-3.5626,.636;-.0801,-5.3748,-4.7284;-.2977,-5.0777,-3.699;-.8673,-4.283,-1.1014;.7429,-4.6926,-2.8554;-1.6175,-5.0919,-3.2422;-1.9032,-4.6877,-1.9403;.4697,-4.312,-1.5401;1.7794,-4.6724,-3.2014;-2.4287,-5.3917,-3.9095;-2.9414,-4.6656,-1.6;-1.0398,-3.793,.2072;-2.1712,-3.5473,.8562;-3.0712,-3.9939,.4307;-2.158,-3.3988,2.3222;-2.2044,-3.1853,5.1188;-3.3624,-3.5371,3.0283;-.9766,-3.1637,3.0413;-.9971,-3.0574,4.429;-3.385,-3.4319,4.4162;-4.2889,-3.7359,2.483;-.0108,-3.0907,2.536;-.0576,-2.8976,4.9664;-4.3302,-3.5499,4.953;-2.2202,-3.1101,6.2097;1.4075,-3.97,-.6447;2.1786,-3.5006,-1.1082;.5066,.1319,-4.718;-3.0447,-1.6071,-.0098;-2.8215,-.8415,1.1338;-1.7339,-.2229,1.4336;-.2257,.595,1.1493;-.2351,1.4486,-.503;1.0703,-.7057,1.4026;-.2025,1.8309,2.5578;-3.7779,-.7805,2.049;-3.5029,-.1548,3.2915;-.0644,.7178,-1.3122;.6046,2.1678,-.5267;-1.1711,2.0142,-.6727;1.0377,-1.0655,2.4441;2.067,-.2791,1.2078;.9461,-1.5447,.6986;-.2941,1.3243,3.5353;.7528,2.3882,2.5559;-1.0197,2.5699,2.4699;-2.6516,-.6359,3.7977;-4.413,-.2819,3.8922;-3.2908,.9176,3.1489;4.8668,-.8076,.9895;4.4141,-2.1226,.8231;3.7684,-2.7851,1.8596;3.5958,-2.1217,3.0708;4.111,-.8488,3.2952;4.7538,-.1985,2.2465;4.4904,-2.5965,-.1573;3.3475,-3.7809,1.7143;2.7349,-2.7278,4.0917;3.9601,-.3638,4.26;5.1197,.8225,2.3848;-.8279,.3205,-4.3353;-1.7836,-.6584,-4.5685;-1.3927,-1.8323,-5.2022;-.0859,-2.0339,-5.6341;.8615,-1.0499,-5.3842;-1.1077,1.2282,-3.7957;-2.8193,-.5386,-4.2428;-2.3828,-2.8932,-5.398;.1791,-2.9617,-6.1421;1.897,-1.2119,-5.6864;2.4506,-2.0572,5.0649;2.3137,-3.8479,3.8907;-2.1,-3.8003,-6.151;-3.4276,-2.8122,-4.7837;7.0182,1.2141,-1.4416;6.0424,1.588,-2.411;8.3696,1.6173,-1.6222;8.7489,2.3414,-2.7257;9.1077,1.3309,-.8666;9.7923,2.6417,-2.8563;6.4716,2.3199,-3.5529;7.7874,2.6862,-3.7057;5.7396,2.5836,-4.3197;8.0952,3.2431,-4.5952;3.2676,3.0945,-3.2119;2.1361,3.4907,-3.9841;4.027,4.1146,-2.5713;3.7104,5.4454,-2.7315;4.8688,3.835,-1.9355;4.3138,6.2048,-2.2318;1.8449,4.875,-4.1468;2.616,5.8368,-3.5394;.9826,5.1594,-4.7576;2.3911,6.8916,-3.6774;-4.4647,-2.0425,-.2933;-4.4772,-2.8625,-1.0323;-4.9954,-2.3736,.6138;-5.0535,-1.2142,-.7315;-2.1562,-1.3599,-1.2028;-2.2727,-.3231,-1.5706;-1.0794,-1.5096,-1.0156;-2.429,-2.0276,-2.0343;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650045986602</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.012434637802 0.001018882627 0.024504382263 0.005337883991</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030384067 -0.004816371 0.000084177 0.000219087 0.000269779 0.000358615 0.000363950 0.000415960 0.000574965 0.000693270 0.000881111 0.000960108 0.001013486 0.001060264 0.001214666 0.001241549 0.001491660 0.001547619 0.001691255 0.001749447 0.001828288 0.002060972 0.002252197 0.002463998 0.002503322 0.002910766 0.003010683 0.003239699 0.003421517 0.003560463 0.004046202 0.004250467 0.004648268 0.004748142 0.005530305 0.005616842 0.005780410 0.005995057 0.006574703 0.006829367 0.007476482 0.007841112 0.008483785 0.008927126 0.009194675 0.009555495 0.010059320 0.010888625 0.011051078 0.011404727 0.012232817 0.012595714 0.013332133 0.013491815 0.014325395 0.014783682 0.015091418 0.015372703 0.015613397 0.016037296 0.016491215 0.017101478 0.018186243 0.018553076 0.019071607 0.020011192 0.020724479 0.021011355 0.021634760 0.022115965 0.022866631 0.024511464 0.025081180 0.025961093 0.026512969 0.027847370 0.028833578 0.029376970 0.031232057 0.031531724 0.032841508 0.033561529 0.034542651 0.035634675 0.037713875 0.038481901 0.039512412 0.040149873 0.041041009 0.043782191 0.044417095 0.044704974 0.046259572 0.048682896 0.049286268 0.049862803 0.050615142 0.051061788 0.052298630 0.052359281 0.052609501 0.052700530 0.053954020 0.054207827 0.054936204 0.055179601 0.056198995 0.056379221 0.056568820 0.057303307 0.058732114 0.059662277 0.060756894 0.061200040 0.062165148 0.062792000 0.062936355 0.064389939 0.064971595 0.065847664 0.066246853 0.067878960 0.069723235 0.072059142 0.073890417 0.075009801 0.077095582 0.082470100 0.084264679 0.085568105 0.086499629 0.086885143 0.088592870 0.089994662 0.091763009 0.094076142 0.094524385 0.095912339 0.096459474 0.097434143 0.098153100 0.099296074 0.099937537 0.101213891 0.101331049 0.101828340 0.102635702 0.103152651 0.103760842 0.104326122 0.105658842 0.106648232 0.108153577 0.108753879 0.109773485 0.110938456 0.112233277 0.113281426 0.114116372 0.116421840 0.118787440 0.119559387 0.121287967 0.122258680 0.124917399 0.125959290 0.126574079 0.130939936 0.134444490 0.135277941 0.142110852 0.142912663 0.145499216 0.146611786 0.148981257 0.150676401 0.152574427 0.152952428 0.155978582 0.159608760 0.160689610 0.172690734 0.173187009 0.176822522 0.183457470 0.183845867 0.188490375 0.188885346 0.191908774 0.193510717 0.197227202 0.199322084 0.203297897 0.206439626 0.206762485 0.209635212 0.210241479 0.213344425 0.214694550 0.216841370 0.218606662 0.224511905 0.225540732 0.230949545 0.234390063 0.234662410 0.235282130 0.243877632 0.255042479 0.256731056 0.261515544 0.266628270 0.278485717 0.282696405 0.286096235 0.289128438 0.293639830 0.300636830 0.304938607 0.305313715 0.306910637 0.314182985 0.314804510 0.321755835 0.326959159 0.329712360 0.348735961 0.349379910 0.351472652 0.354673414 0.356064053 0.361543739 0.361813383 0.378459322 0.382138197 0.389649564 0.409179421 0.422844169 0.428271963 0.450524175 0.466703506 0.468971935 0.475638546 0.480785486 0.481410276 0.488717324 0.504110430 0.510007995 0.533678844 0.565339004 0.569547119 0.586639302 0.592245941 0.601883011 0.604566246 0.639143279 0.643250165 0.645028932 0.670749411 0.674473464 0.684200335 0.690859761 0.691287823 0.698649623 0.703897987 0.714832433 0.739843333 0.742579808 0.751043238 0.759919117 0.771884106 0.777800962 0.808260133 0.809944768 0.813013187 0.817876319 0.820692809 0.823603785 0.829897843 0.832025395 0.832240495 0.841853318 0.845039593 0.846354400 0.857644916 0.863914155 0.864674262 0.871578438 0.874613568 0.883182122 0.884733205 0.888777444 0.891701034 0.898251096 0.918843561 0.922450523 0.930959785 0.932970011 0.964034879 0.975430470 0.984412549 0.999646009 1.012206520 1.024838635 1.040288865 1.048440022 1.055443426 1.063335936 1.085611741 1.086744675 1.100484575 1.105219340 1.111964613 1.113412802 1.123114305 1.135018839 1.139326931 1.152977885 1.170602382 1.175150596 1.180996929 1.186341023 1.194098718 1.214792044 1.220864523 1.265598604 1.297087506 1.314111754 1.326706099 1.327583894 1.329754010 1.331397039 1.334859312 1.341684922 1.344626984 1.357735623 1.374971565 1.380991899 1.381970701 1.389689465 1.418791706 1.421339365 1.551093681 1.660084741 1.772443138</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">98</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33630253" y3="-0.01270119" z3="-0.18291632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37256649" y3="0.18261298" z3="0.43868974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62429866" y3="0.44182935" z3="-0.31666459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67741382" y3="1.20418512" z3="-2.21990323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37092862" y3="0.35600736" z3="-1.16865828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.692879" y3="0.7809355" z3="-3.63412498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.56110206" y3="1.70015102" z3="-3.0742972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.28078661" y3="2.50477256" z3="-4.53090077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.51260431" y3="1.16344139" z3="-4.33806029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.39315014" y3="2.82426336" z3="-5.08558036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93760037" y3="-0.54821391" z3="-3.4516314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09678655" y3="-0.08532599" z3="-0.99776707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41783259" y3="-1.21031036" z3="-2.03104755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94430152" y3="-1.09605888" z3="-1.85872023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12753342" y3="-2.53297088" z3="-1.90501471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1450529" y3="-3.56753813" z3="0.6422574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.08084647" y3="-5.36813225" z3="-4.7262133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29865158" y3="-5.07306602" z3="-3.69622972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86847474" y3="-4.28538277" z3="-1.09672753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74112971" y3="-4.68557309" z3="-2.85338773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61718545" y3="-5.09421214" z3="-3.23784332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.90225711" y3="-4.69464783" z3="-1.93470495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.46751548" y3="-4.30697301" z3="-1.53760739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77692797" y3="-4.65991944" z3="-3.19975414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42922152" y3="-5.3935307" z3="-3.90491843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93924626" y3="-4.68017562" z3="-1.59277158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04116479" y3="-3.79848631" z3="0.21301838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17293645" y3="-3.55141523" z3="0.86119568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07273486" y3="-3.99741093" z3="0.43507364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16043563" y3="-3.40277682" z3="2.3272215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20873439" y3="-3.1870466" z3="5.12354627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36530679" y3="-3.53946924" z3="3.03251743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97879964" y3="-3.16962155" z3="3.04715748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00033532" y3="-3.06205384" z3="4.43478328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38890439" y3="-3.43301638" z3="4.42023167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.29149749" y3="-3.73793119" z3="2.48658282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01230151" y3="-3.09926724" z3="2.54298597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06101947" y3="-2.90316997" z3="4.97248573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33500117" y3="-3.54904351" z3="4.95639253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2256684" y3="-3.1106376" z3="6.21430726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40614218" y3="-3.96208947" z3="-0.64326543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17644457" y3="-3.49336842" z3="-1.10777523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50944419" y3="0.13671057" z3="-4.72101455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04499946" y3="-1.61121926" z3="-0.00551416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.82631189" y3="-0.84386957" z3="1.13766912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.73909311" y3="-0.22145195" z3="1.43808553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.22823587" y3="0.59116488" z3="1.15064757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.24188576" y3="1.45026623" z3="-0.49842291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.06506988" y3="-0.71421347" z3="1.39494727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.19520186" y3="1.82170688" z3="2.56334205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.78523212" y3="-0.78432741" z3="2.05099648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.51211009" y3="-0.15728545" z3="3.29440029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.07249534" y3="0.7208684" z3="-1.30993531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.59809154" y3="2.17025982" z3="-0.52201022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.17848348" y3="2.00790419" z3="-0.6623573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03633565" y3="-1.07531585" z3="2.43659913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.06400818" y3="-0.29074137" z3="1.19567771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.93601573" y3="-1.55275317" z3="0.69131831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.28622194" y3="1.31189918" z3="3.53902647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.7618159" y3="2.37476337" z3="2.56085039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.00967417" y3="2.5632419" z3="2.48020516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.66049674" y3="-0.64012406" z3="3.8016187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.42424394" y3="-0.28289148" z3="3.89375404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.2993965" y3="0.9150609" z3="3.15124966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86389186" y3="-0.80435606" z3="0.98724204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41404293" y3="-2.1204631" z3="0.81937694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76849207" y3="-2.78450243" z3="1.8549845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.59288175" y3="-2.1215873" z3="3.06623384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.10491284" y3="-0.8473826" z3="3.29186149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.74779223" y3="-0.19540712" z3="2.24424541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49243436" y3="-2.59355874" z3="-0.16156725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35034948" y3="-3.78123778" z3="1.70902986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.73183073" y3="-2.72961297" z3="4.08591745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.95169795" y3="-0.36313931" z3="4.25690504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.11122349" y3="0.82654708" z3="2.38346585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82539382" y3="0.32465087" z3="-4.33644198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78201929" y3="-0.65502378" z3="-4.56562695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39248656" y3="-1.82952082" z3="-5.19751491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.08554828" y3="-2.03048729" z3="-5.63346152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.86262196" y3="-1.04589865" z3="-5.38615197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.10496763" y3="1.23322427" z3="-3.79570032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81298401" y3="-0.53061364" z3="-4.23822303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.38272547" y3="-2.89151578" z3="-5.38996253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17793537" y3="-2.95884049" z3="-6.14001052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89735152" y3="-1.20885687" z3="-5.69133708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.44860092" y3="-2.0615295" z3="5.06116161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30952149" y3="-3.84870582" z3="3.88213374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.10134232" y3="-3.79952215" z3="-6.14301458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42600121" y3="-2.81004518" z3="-4.77300735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.01879051" y3="1.21573147" z3="-1.44172306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04453963" y3="1.59012477" z3="-2.41247346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37050108" y3="1.61854369" z3="-1.62020104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.75182289" y3="2.34319533" z3="-2.72304204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.10701054" y3="1.3316884" z3="-0.86332687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79546262" y3="2.6444093" z3="-2.8515494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47592443" y3="2.32128127" z3="-3.55416266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.79202194" y3="2.68764756" z3="-3.70483478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.74513628" y3="2.58438506" z3="-4.32245621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10158948" y3="3.24473093" z3="-4.59383837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.27128401" y3="3.09960009" z3="-3.2170565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.14194191" y3="3.49470494" z3="-3.99253438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.03102415" y3="4.11967661" z3="-2.57709308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.724187" y3="5.44585195" z3="-2.74816157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.86931887" y3="3.8417606" z3="-1.93668712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.32042505" y3="6.21224929" z3="-2.23795816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.85849163" y3="4.87556887" z3="-4.16339089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.635211" y3="5.83334502" z3="-3.56386101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="0.99550155" y3="5.16158774" z3="-4.77298961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.39732232" y3="6.89859258" z3="-3.69052568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46239134" y3="-2.04816592" z3="-0.29323795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4701933" y3="-2.86516243" z3="-1.0336644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99414184" y3="-2.38263054" z3="0.61107838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05190074" y3="-1.22024445" z3="-0.73110228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1546358" y3="-1.36322591" z3="-1.1969443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27185374" y3="-0.32721061" z3="-1.566311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07801674" y3="-1.51078566" z3="-1.00903954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42499149" y3="-2.03151371" z3="-2.02858457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3363,-.0127,-.1829;7.3726,.1826,.4387;6.6243,.4418,-.3167;4.6774,1.2042,-2.2199;4.3709,.356,-1.1687;2.6929,.7809,-3.6341;3.5611,1.7002,-3.0743;1.2808,2.5048,-4.5309;1.5126,1.1634,-4.3381;.3932,2.8243,-5.0856;2.9376,-.5482,-3.4516;3.0968,-.0853,-.9978;2.4178,-1.2103,-2.031;.9443,-1.0961,-1.8587;3.1275,-2.533,-1.905;-.1451,-3.5675,.6423;-.0808,-5.3681,-4.7262;-.2987,-5.0731,-3.6962;-.8685,-4.2854,-1.0967;.7411,-4.6856,-2.8534;-1.6172,-5.0942,-3.2378;-1.9023,-4.6946,-1.9347;.4675,-4.307,-1.5376;1.7769,-4.6599,-3.1998;-2.4292,-5.3935,-3.9049;-2.9392,-4.6802,-1.5928;-1.0412,-3.7985,.213;-2.1729,-3.5514,.8612;-3.0727,-3.9974,.4351;-2.1604,-3.4028,2.3272;-2.2087,-3.187,5.1235;-3.3653,-3.5395,3.0325;-.9788,-3.1696,3.0472;-1.0003,-3.0621,4.4348;-3.3889,-3.433,4.4202;-4.2915,-3.7379,2.4866;-.0123,-3.0993,2.543;-.061,-2.9032,4.9725;-4.335,-3.549,4.9564;-2.2257,-3.1106,6.2143;1.4061,-3.9621,-.6433;2.1764,-3.4934,-1.1078;.5094,.1367,-4.721;-3.045,-1.6112,-.0055;-2.8263,-.8439,1.1377;-1.7391,-.2215,1.4381;-.2282,.5912,1.1506;-.2419,1.4503,-.4984;1.0651,-.7142,1.3949;-.1952,1.8217,2.5633;-3.7852,-.7843,2.051;-3.5121,-.1573,3.2944;-.0725,.7209,-1.3099;.5981,2.1703,-.522;-1.1785,2.0079,-.6624;1.0363,-1.0753,2.4366;2.064,-.2907,1.1957;.936,-1.5528,.6913;-.2862,1.3119,3.539;.7618,2.3748,2.5609;-1.0097,2.5632,2.4802;-2.6605,-.6401,3.8016;-4.4242,-.2829,3.8938;-3.2994,.9151,3.1512;4.8639,-.8044,.9872;4.414,-2.1205,.8194;3.7685,-2.7845,1.855;3.5929,-2.1216,3.0662;4.1049,-.8474,3.2919;4.7478,-.1954,2.2442;4.4924,-2.5936,-.1616;3.3503,-3.7812,1.709;2.7318,-2.7296,4.0859;3.9517,-.3631,4.2569;5.1112,.8265,2.3835;-.8254,.3247,-4.3364;-1.782,-.655,-4.5656;-1.3925,-1.8295,-5.1975;-.0855,-2.0305,-5.6335;.8626,-1.0459,-5.3862;-1.105,1.2332,-3.7957;-2.813,-.5306,-4.2382;-2.3827,-2.8915,-5.39;.1779,-2.9588,-6.14;1.8974,-1.2089,-5.6913;2.4486,-2.0615,5.0612;2.3095,-3.8487,3.8821;-2.1013,-3.7995,-6.143;-3.426,-2.81,-4.773;7.0188,1.2157,-1.4417;6.0445,1.5901,-2.4125;8.3705,1.6185,-1.6202;8.7518,2.3432,-2.723;9.107,1.3317,-.8633;9.7955,2.6444,-2.8515;6.4759,2.3213,-3.5542;7.792,2.6876,-3.7048;5.7451,2.5844,-4.3225;8.1016,3.2447,-4.5938;3.2713,3.0996,-3.2171;2.1419,3.4947,-3.9925;4.031,4.1197,-2.5771;3.7242,5.4459,-2.7482;4.8693,3.8418,-1.9367;4.3204,6.2122,-2.238;1.8585,4.8756,-4.1634;2.6352,5.8333,-3.5639;.9955,5.1616,-4.773;2.3973,6.8986,-3.6905;-4.4624,-2.0482,-.2932;-4.4702,-2.8652,-1.0337;-4.9941,-2.3826,.6111;-5.0519,-1.2202,-.7311;-2.1546,-1.3632,-1.1969;-2.2719,-.3272,-1.5663;-1.078,-1.5108,-1.009;-2.425,-2.0315,-2.0286;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650071079514</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.011755484076 0.000938993496 0.019217175059 0.005337237034</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030384315 -0.003995808 0.000095889 0.000223217 0.000267855 0.000359656 0.000364295 0.000416553 0.000575061 0.000693518 0.000879815 0.000960965 0.001015863 0.001062902 0.001225482 0.001241714 0.001492963 0.001549478 0.001691105 0.001752259 0.001828235 0.002066356 0.002255817 0.002468905 0.002514758 0.002910065 0.003011015 0.003244137 0.003421050 0.003562926 0.004047642 0.004264797 0.004647172 0.004748046 0.005529471 0.005656176 0.005781755 0.005995421 0.006576709 0.006829856 0.007489546 0.007840776 0.008483911 0.008942905 0.009209393 0.009560629 0.010078234 0.010915372 0.011058013 0.011401169 0.012236991 0.012615823 0.013334223 0.013492316 0.014339642 0.014803544 0.015105315 0.015392040 0.015643864 0.016037575 0.016539433 0.017104231 0.018186894 0.018568763 0.019070212 0.020011564 0.020756711 0.021011430 0.021665217 0.022131106 0.022874090 0.024522139 0.025096967 0.025969287 0.026522354 0.027844512 0.028845102 0.029380331 0.031259022 0.031532152 0.032843379 0.033563431 0.034549376 0.035658276 0.037719134 0.038501949 0.039551034 0.040150319 0.041041075 0.043851965 0.044430748 0.044706424 0.046431059 0.048783585 0.049293607 0.049924316 0.050656682 0.051072261 0.052303803 0.052360346 0.052608952 0.052712803 0.053983615 0.054226934 0.055053895 0.055181124 0.056279348 0.056384975 0.056608012 0.057434691 0.058871389 0.059691406 0.060770841 0.061200400 0.062199219 0.062811065 0.063005007 0.064485686 0.064971812 0.065933591 0.066279394 0.068036715 0.069722254 0.072079075 0.073899450 0.075032435 0.077095512 0.082654087 0.084315737 0.085606551 0.086525049 0.086990001 0.088794941 0.090009797 0.091929966 0.094083263 0.094525662 0.095927302 0.096463700 0.097435806 0.098159519 0.099298170 0.099939085 0.101211170 0.101372192 0.102016396 0.102673475 0.103154687 0.103800700 0.104642306 0.106098786 0.106648313 0.108418077 0.108871508 0.109787244 0.111235007 0.112241131 0.113691054 0.114139621 0.116425069 0.118788196 0.119859686 0.121331137 0.122439838 0.124922810 0.125965385 0.126604025 0.130960618 0.134448694 0.135288127 0.142119373 0.142918349 0.145737820 0.146644914 0.149007711 0.150683532 0.152666707 0.152972623 0.156129875 0.159632220 0.160706355 0.172725451 0.173197139 0.177166600 0.183495928 0.183927083 0.188494328 0.188885832 0.192220678 0.193513897 0.197353847 0.199349115 0.203321246 0.206455262 0.206764567 0.209636170 0.210337526 0.213500920 0.214693234 0.216877437 0.218641181 0.224518449 0.225624744 0.231211429 0.234399616 0.234733146 0.235285753 0.243881211 0.255043138 0.256732140 0.261515545 0.266633056 0.278486816 0.282714159 0.286096441 0.289162528 0.293673551 0.300637459 0.304970642 0.305321495 0.306923792 0.314183816 0.314813487 0.321755768 0.326962833 0.329730517 0.348797723 0.349448041 0.351507598 0.354684194 0.356061299 0.361551163 0.361854672 0.378489217 0.382270694 0.389703392 0.409306889 0.423081029 0.428272000 0.450524333 0.466704103 0.468989585 0.475638936 0.480847966 0.481416410 0.488792089 0.504111489 0.510658816 0.533691095 0.565417713 0.570524323 0.587201165 0.592257036 0.601886926 0.604949920 0.639179088 0.643252925 0.645052683 0.670765085 0.674521948 0.684204245 0.690900754 0.691287702 0.698653281 0.703901027 0.714938840 0.740165856 0.742903587 0.751179512 0.759937529 0.771885032 0.778085986 0.808289770 0.809963433 0.813013432 0.817924248 0.820818920 0.823652662 0.829948835 0.832025795 0.832408225 0.841885571 0.845041128 0.846357843 0.857646203 0.863917672 0.864674670 0.871640881 0.874667651 0.883339904 0.885603606 0.888855016 0.891715410 0.898396384 0.918843084 0.922464384 0.930998031 0.933167192 0.964037524 0.975440150 0.984455317 0.999665984 1.012206477 1.024851237 1.040289012 1.048440324 1.055503626 1.063407738 1.085613789 1.086763677 1.100615317 1.105222991 1.111971095 1.113499175 1.123120108 1.135020356 1.139404887 1.161916670 1.170603859 1.175177351 1.181078276 1.186506529 1.194101563 1.214821416 1.220932720 1.265598169 1.297191024 1.314171815 1.326767666 1.328444964 1.329755858 1.331606455 1.334873818 1.341686980 1.344633002 1.357766243 1.374971656 1.381001147 1.382033623 1.389757820 1.418802247 1.421351718 1.551093877 1.660085255 1.772448072</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">99</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33495628" y3="-0.00907063" z3="-0.18413189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37099085" y3="0.18470578" z3="0.43940003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6236699" y3="0.44470906" z3="-0.31660208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.67940243" y3="1.20683651" z3="-2.22254475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37078017" y3="0.36023768" z3="-1.17091291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69633116" y3="0.78328878" z3="-3.63972142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.56511972" y3="1.70224943" z3="-3.07982101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.28962752" y3="2.50622173" z3="-4.54349557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.51755128" y3="1.16562165" z3="-4.34666622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.40188752" y3="2.82821475" z3="-5.09648679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93786843" y3="-0.54497711" z3="-3.45348015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0959308" y3="-0.07894071" z3="-1.00085254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41633286" y3="-1.20432568" z3="-2.03289182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94283149" y3="-1.08861603" z3="-1.86206045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12432892" y3="-2.52755174" z3="-1.90460931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14556002" y3="-3.57257581" z3="0.64783662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.08198944" y3="-5.35946047" z3="-4.72569042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.299096" y3="-5.06858559" z3="-3.69456266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86780822" y3="-4.28900252" z3="-1.09235185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74009167" y3="-4.67788036" z3="-2.85254868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61679397" y3="-5.09680326" z3="-3.23404245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.90197514" y3="-4.7006615" z3="-1.92968801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.46846427" y3="-4.30579239" z3="-1.53498607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77505853" y3="-4.64592305" z3="-3.20044282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42631941" y3="-5.4002336" z3="-3.90063237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93993577" y3="-4.68863857" z3="-1.58581014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04144279" y3="-3.80316434" z3="0.21779109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17362703" y3="-3.55601628" z3="0.86521537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07329382" y3="-4.00213248" z3="0.43897006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16180287" y3="-3.4079149" z3="2.33143427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21174868" y3="-3.19159472" z3="5.12784646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36722817" y3="-3.54389275" z3="3.03600793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98110668" y3="-3.17476625" z3="3.05217967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00347285" y3="-3.06680925" z3="4.4397844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39162522" y3="-3.43714138" z3="4.42370737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.29382045" y3="-3.74107621" z3="2.48945477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01465591" y3="-3.10449982" z3="2.54888617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06461903" y3="-2.90784523" z3="4.97796748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33800056" y3="-3.55256541" z3="4.95918173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22952314" y3="-3.11426971" z3="6.21854666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40782899" y3="-3.96005332" z3="-0.64114473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17381259" y3="-3.4871701" z3="-1.10563453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51127563" y3="0.14204742" z3="-4.72300401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04419101" y3="-1.61702554" z3="-0.00270511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.82765763" y3="-0.84816778" z3="1.14104966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.74260389" y3="-0.22350038" z3="1.44372313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.23236132" y3="0.58645884" z3="1.15236896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.25076089" y3="1.44873143" z3="-0.49462061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0593539" y3="-0.7221672" z3="1.38916684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.19203016" y3="1.81291123" z3="2.56813595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.78839276" y3="-0.78873993" z3="2.05279796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.51973476" y3="-0.16171504" z3="3.29671275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.07534318" y3="0.72733527" z3="-1.30764253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.58619113" y3="2.17145736" z3="-0.51437562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.18925556" y3="2.01111332" z3="-0.65938888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03193754" y3="-1.08660687" z3="2.43023477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.05890196" y3="-0.30107379" z3="1.18803641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.92426699" y3="-1.55866458" z3="0.68370151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.27808061" y3="1.30036822" z3="3.5421242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.76501904" y3="2.36513149" z3="2.5634357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.00596252" y3="2.55491357" z3="2.49147897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.6691165" y3="-0.64164189" z3="3.80653872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.43220947" y3="-0.29045313" z3="3.89302701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.31007935" y3="0.91081833" z3="3.15488287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.86087937" y3="-0.80088562" z3="0.98549567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41366564" y3="-2.11778012" z3="0.81746563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76749609" y3="-2.78257378" z3="1.85215259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.588904" y3="-2.11952509" z3="3.06286024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.097721" y3="-0.84408095" z3="3.28863148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.74085387" y3="-0.19130136" z3="2.24169914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4950864" y3="-2.59143642" z3="-0.162506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35093041" y3="-3.78011289" z3="1.70538287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72804574" y3="-2.72906957" z3="4.08180821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.94177711" y3="-0.35965396" z3="4.2530218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.10211242" y3="0.83144051" z3="2.38109352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82140865" y3="0.33230148" z3="-4.33427201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7787699" y3="-0.64776605" z3="-4.56019668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39177143" y3="-1.8237355" z3="-5.19260478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.08690657" y3="-2.02672484" z3="-5.62997312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.86201097" y3="-1.04162799" z3="-5.38653155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0990013" y3="1.24178196" z3="-3.79594708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8110673" y3="-0.52453632" z3="-4.23029738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.38320064" y3="-2.88568853" z3="-5.38120128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17564795" y3="-2.95603134" z3="-6.13654427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89706175" y3="-1.20362259" z3="-5.69443707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.44727653" y3="-2.06338622" z3="5.05977678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30335899" y3="-3.84703989" z3="3.87469908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.10493901" y3="-3.79441185" z3="-6.13418867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42440434" y3="-2.803302" z3="-4.76117019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02029553" y3="1.21833997" z3="-1.44133869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0473718" y3="1.59216097" z3="-2.41363105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37256412" y3="1.61979434" z3="-1.61844446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.75565431" y3="2.34208728" z3="-2.72155292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.10804713" y3="1.33243658" z3="-0.86068582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.79940305" y3="2.64100296" z3="-2.84919842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48089454" y3="2.32166912" z3="-3.55553003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.79732714" y3="2.68636722" z3="-3.70488932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75147897" y3="2.58434489" z3="-4.32526839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10834785" y3="3.24156628" z3="-4.59412042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.27859179" y3="3.10200868" z3="-3.22563041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.15174565" y3="3.4970575" z3="-4.00464631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.03904982" y3="4.12239145" z3="-2.58662448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.72843204" y3="5.45312944" z3="-2.75480425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.8759912" y3="3.84442541" z3="-1.94419132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.33247747" y3="6.21266553" z3="-2.25640761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.86641036" y3="4.88156091" z3="-4.17478278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.63915415" y3="5.84392011" z3="-3.56954544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.0076914" y3="5.16517905" z3="-4.79064291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.41429766" y3="6.90127915" z3="-3.70974286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46168247" y3="-2.05536462" z3="-0.29236686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46995893" y3="-2.87371359" z3="-1.03397295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99436887" y3="-2.39028983" z3="0.61241416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05144429" y3="-1.22750736" z3="-0.73015623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15246698" y3="-1.36712137" z3="-1.19222148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27017843" y3="-0.33038734" z3="-1.56062199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07649423" y3="-1.51407291" z3="-1.00109076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41991438" y3="-2.0351589" z3="-2.0246392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.335,-.0091,-.1841;7.371,.1847,.4394;6.6237,.4447,-.3166;4.6794,1.2068,-2.2225;4.3708,.3602,-1.1709;2.6963,.7833,-3.6397;3.5651,1.7022,-3.0798;1.2896,2.5062,-4.5435;1.5176,1.1656,-4.3467;.4019,2.8282,-5.0965;2.9379,-.545,-3.4535;3.0959,-.0789,-1.0009;2.4163,-1.2043,-2.0329;.9428,-1.0886,-1.8621;3.1243,-2.5276,-1.9046;-.1456,-3.5726,.6478;-.082,-5.3595,-4.7257;-.2991,-5.0686,-3.6946;-.8678,-4.289,-1.0924;.7401,-4.6779,-2.8525;-1.6168,-5.0968,-3.234;-1.902,-4.7007,-1.9297;.4685,-4.3058,-1.535;1.7751,-4.6459,-3.2004;-2.4263,-5.4002,-3.9006;-2.9399,-4.6886,-1.5858;-1.0414,-3.8032,.2178;-2.1736,-3.556,.8652;-3.0733,-4.0021,.439;-2.1618,-3.4079,2.3314;-2.2117,-3.1916,5.1278;-3.3672,-3.5439,3.036;-.9811,-3.1748,3.0522;-1.0035,-3.0668,4.4398;-3.3916,-3.4371,4.4237;-4.2938,-3.7411,2.4895;-.0147,-3.1045,2.5489;-.0646,-2.9078,4.978;-4.338,-3.5526,4.9592;-2.2295,-3.1143,6.2185;1.4078,-3.9601,-.6411;2.1738,-3.4872,-1.1056;.5113,.142,-4.723;-3.0442,-1.617,-.0027;-2.8277,-.8482,1.141;-1.7426,-.2235,1.4437;-.2324,.5865,1.1524;-.2508,1.4487,-.4946;1.0594,-.7222,1.3892;-.192,1.8129,2.5681;-3.7884,-.7887,2.0528;-3.5197,-.1617,3.2967;-.0753,.7273,-1.3076;.5862,2.1715,-.5144;-1.1893,2.0111,-.6594;1.0319,-1.0866,2.4302;2.0589,-.3011,1.188;.9243,-1.5587,.6837;-.2781,1.3004,3.5421;.765,2.3651,2.5634;-1.006,2.5549,2.4915;-2.6691,-.6416,3.8065;-4.4322,-.2905,3.893;-3.3101,.9108,3.1549;4.8609,-.8009,.9855;4.4137,-2.1178,.8175;3.7675,-2.7826,1.8522;3.5889,-2.1195,3.0629;4.0977,-.8441,3.2886;4.7409,-.1913,2.2417;4.4951,-2.5914,-.1625;3.3509,-3.7801,1.7054;2.728,-2.7291,4.0818;3.9418,-.3597,4.253;5.1021,.8314,2.3811;-.8214,.3323,-4.3343;-1.7788,-.6478,-4.5602;-1.3918,-1.8237,-5.1926;-.0869,-2.0267,-5.63;.862,-1.0416,-5.3865;-1.099,1.2418,-3.7959;-2.8111,-.5245,-4.2303;-2.3832,-2.8857,-5.3812;.1756,-2.956,-6.1365;1.8971,-1.2036,-5.6944;2.4473,-2.0634,5.0598;2.3034,-3.847,3.8747;-2.1049,-3.7944,-6.1342;-3.4244,-2.8033,-4.7612;7.0203,1.2183,-1.4413;6.0474,1.5922,-2.4136;8.3726,1.6198,-1.6184;8.7557,2.3421,-2.7216;9.108,1.3324,-.8607;9.7994,2.641,-2.8492;6.4809,2.3217,-3.5555;7.7973,2.6864,-3.7049;5.7515,2.5843,-4.3253;8.1083,3.2416,-4.5941;3.2786,3.102,-3.2256;2.1517,3.4971,-4.0046;4.039,4.1224,-2.5866;3.7284,5.4531,-2.7548;4.876,3.8444,-1.9442;4.3325,6.2127,-2.2564;1.8664,4.8816,-4.1748;2.6392,5.8439,-3.5695;1.0077,5.1652,-4.7906;2.4143,6.9013,-3.7097;-4.4617,-2.0554,-.2924;-4.47,-2.8737,-1.034;-4.9944,-2.3903,.6124;-5.0514,-1.2275,-.7302;-2.1525,-1.3671,-1.1922;-2.2702,-.3304,-1.5606;-1.0765,-1.5141,-1.0011;-2.4199,-2.0352,-2.0246;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650098389635</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009230130615 0.000829616641 0.019796664658 0.005337881872</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030388729 -0.003611158 0.000106971 0.000221762 0.000265756 0.000359679 0.000366360 0.000416148 0.000575082 0.000694631 0.000879727 0.000972712 0.001017166 0.001064260 0.001225081 0.001241687 0.001495893 0.001579722 0.001695575 0.001752591 0.001835377 0.002090075 0.002270651 0.002471654 0.002520434 0.002918029 0.003010603 0.003259077 0.003446034 0.003569417 0.004049438 0.004278686 0.004651825 0.004754595 0.005531673 0.005660988 0.005785365 0.005995478 0.006577459 0.006835940 0.007496835 0.007849739 0.008484852 0.008969990 0.009213135 0.009566013 0.010086221 0.010963558 0.011105283 0.011432161 0.012237272 0.012622992 0.013348762 0.013492578 0.014343411 0.014813248 0.015110906 0.015415802 0.015658515 0.016045720 0.016644161 0.017111892 0.018199429 0.018581933 0.019081154 0.020014706 0.020810961 0.021011454 0.021773838 0.022181169 0.022873405 0.024563353 0.025141680 0.025991660 0.026522986 0.027856380 0.028854945 0.029404976 0.031263688 0.031532494 0.032852569 0.033574379 0.034546788 0.035661692 0.037724025 0.038518626 0.039609807 0.040155606 0.041041871 0.043876971 0.044431519 0.044720982 0.046516158 0.048844298 0.049295202 0.049998778 0.050671468 0.051082564 0.052322844 0.052361602 0.052609244 0.052714133 0.053995320 0.054226213 0.055169793 0.055211784 0.056313251 0.056385233 0.056669648 0.057579255 0.058981347 0.059777347 0.060792010 0.061200508 0.062288437 0.062826427 0.063006320 0.064570055 0.064971838 0.065998626 0.066462349 0.068096927 0.069731235 0.072077135 0.073901838 0.075035265 0.077097716 0.082743071 0.084318499 0.085602531 0.086551513 0.087095930 0.088927890 0.090010861 0.092081294 0.094098241 0.094529849 0.095926199 0.096464246 0.097437799 0.098176048 0.099299995 0.099943003 0.101225146 0.101420586 0.102176935 0.102678003 0.103168641 0.103812192 0.104870425 0.106299626 0.106652900 0.108534772 0.108946531 0.109787324 0.111551296 0.112269292 0.114089265 0.114503621 0.116459832 0.118790736 0.120035442 0.121338884 0.122462776 0.124922084 0.125966830 0.126618631 0.130999775 0.134452477 0.135286780 0.142135901 0.142920994 0.145929405 0.146643079 0.149007583 0.150705892 0.152759401 0.153044710 0.156204705 0.159661593 0.160705436 0.172766481 0.173207128 0.177489102 0.183510463 0.183992049 0.188497124 0.188893474 0.192485392 0.193514909 0.197443616 0.199349360 0.203373728 0.206470870 0.206765739 0.209636682 0.210417187 0.213701197 0.214739588 0.216913001 0.218717508 0.224518306 0.225680463 0.231339276 0.234415900 0.234791623 0.235294058 0.243889067 0.255043902 0.256738122 0.261522216 0.266633288 0.278487189 0.282726840 0.286096465 0.289178550 0.293673078 0.300649640 0.304969789 0.305327845 0.306926311 0.314184439 0.314813891 0.321762913 0.327004752 0.329736663 0.348811722 0.349466993 0.351512333 0.354701171 0.356114389 0.361586789 0.361891884 0.378503510 0.382288101 0.389729990 0.409389780 0.423276399 0.428277277 0.450524436 0.466708412 0.469031809 0.475639482 0.481014536 0.481420915 0.488933109 0.504191266 0.511027503 0.533694024 0.565434617 0.571100000 0.587926056 0.592285197 0.601900537 0.605128714 0.639258357 0.643341416 0.645095547 0.670905705 0.674521127 0.684213749 0.690902647 0.691291143 0.698698595 0.703907050 0.714991536 0.740305560 0.743154939 0.751247654 0.759947126 0.771885925 0.778190083 0.808319754 0.809967734 0.813013483 0.818097884 0.820874236 0.823700951 0.829949297 0.832067504 0.832563225 0.842058387 0.845045430 0.846360139 0.857647023 0.863924020 0.864674683 0.871659389 0.874942877 0.883419414 0.887012610 0.888904526 0.891721718 0.898396177 0.918854467 0.922475910 0.931003590 0.933375947 0.964046091 0.975442321 0.984458133 0.999717020 1.012212494 1.024923404 1.040292783 1.048444441 1.055570638 1.063410427 1.085622787 1.086767637 1.100627423 1.105234478 1.111973018 1.113535689 1.123123387 1.135021426 1.139427665 1.167960259 1.170608080 1.175246916 1.181130788 1.186524015 1.194101530 1.215026196 1.220932131 1.265651298 1.297284937 1.314308784 1.326811446 1.329391218 1.329882383 1.331740251 1.334876259 1.341690061 1.344633455 1.357806285 1.374975334 1.381007345 1.382056225 1.389777528 1.418802406 1.421357084 1.551096359 1.660085342 1.772448892</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">100</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33375569" y3="-0.00515415" z3="-0.18492257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36948033" y3="0.18455069" z3="0.43996718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62324025" y3="0.44494285" z3="-0.31702193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68218783" y3="1.20951418" z3="-2.22535534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37112032" y3="0.36513826" z3="-1.17266994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69885989" y3="0.78802327" z3="-3.64171389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.56923856" y3="1.70598628" z3="-3.08392108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.29261929" y3="2.51450335" z3="-4.54454215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52038321" y3="1.1725113" z3="-4.34715369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4063877" y3="2.83465988" z3="-5.10130129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93999473" y3="-0.54151607" z3="-3.45570071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09538972" y3="-0.07217221" z3="-1.00315545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4161643" y3="-1.19875764" z3="-2.03453791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9425385" y3="-1.08207352" z3="-1.86569109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12421638" y3="-2.52179834" z3="-1.90356953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14553966" y3="-3.57794109" z3="0.65210909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.08099414" y3="-5.35298208" z3="-4.72524617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29816592" y3="-5.06455472" z3="-3.69326706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86731505" y3="-4.29203575" z3="-1.08938175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74075268" y3="-4.67168545" z3="-2.85171505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61555461" y3="-5.09812451" z3="-3.23163369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.9006642" y3="-4.7057827" z3="-1.92620752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.46752657" y3="-4.30077177" z3="-1.53358851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77542077" y3="-4.63583374" z3="-3.20163146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42627858" y3="-5.40185249" z3="-3.8980516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93676621" y3="-4.70146175" z3="-1.58139811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04090398" y3="-3.8096488" z3="0.22199658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17307817" y3="-3.56243609" z3="0.86916071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07314776" y3="-4.00705718" z3="0.44173065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16262391" y3="-3.41322979" z3="2.33493963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21419856" y3="-3.19628321" z3="5.13107514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36841956" y3="-3.54953766" z3="3.03886456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98214927" y3="-3.17957019" z3="3.05606609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00523912" y3="-3.07147009" z3="4.4435986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39352049" y3="-3.44263783" z3="4.42649676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.29362326" y3="-3.7485474" z3="2.49202476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01459898" y3="-3.11077534" z3="2.55306548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06619549" y3="-2.91279017" z3="4.98210678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33988139" y3="-3.55892414" z3="4.9616224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23201944" y3="-3.11972042" z3="6.22184965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40359428" y3="-3.94994313" z3="-0.64032488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17491459" y3="-3.48074935" z3="-1.10620262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51344676" y3="0.14618809" z3="-4.72605968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04415164" y3="-1.62125295" z3="0.00099801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.83300847" y3="-0.85260426" z3="1.1445619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.75462234" y3="-0.21980841" z3="1.44925101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.23800535" y3="0.58310464" z3="1.15442774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.25737852" y3="1.45168347" z3="-0.49071186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.05203724" y3="-0.72826804" z3="1.38445531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.19051976" y3="1.80732906" z3="2.57204513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.79430859" y3="-0.79982174" z3="2.05510891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.52953009" y3="-0.17000682" z3="3.29833209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.08815978" y3="0.7243106" z3="-1.30704536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.57864622" y3="2.17605268" z3="-0.51342061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.19733993" y3="2.00616985" z3="-0.65030021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.03039354" y3="-1.09236826" z3="2.42455808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.04755544" y3="-0.30392346" z3="1.17979693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.91790655" y3="-1.56284649" z3="0.6779067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.27923132" y3="1.29367591" z3="3.54634578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.77091045" y3="2.35454341" z3="2.56558756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.00107977" y3="2.55561111" z3="2.49686492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.67775893" y3="-0.64604785" z3="3.80964877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.44245985" y3="-0.30065229" z3="3.89465523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.3218719" y3="0.90318805" z3="3.15496249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85772769" y3="-0.79643063" z3="0.9844018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41417239" y3="-2.11455931" z3="0.8173587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76731242" y3="-2.77963416" z3="1.85152357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.58487162" y3="-2.11576434" z3="3.06105496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.08953524" y3="-0.83867188" z3="3.28588099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.73302892" y3="-0.185555" z3="2.23939973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49818508" y3="-2.58895307" z3="-0.16226522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35333067" y3="-3.77810376" z3="1.70551643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72425224" y3="-2.72634093" z3="4.07958003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.93037393" y3="-0.35352207" z3="4.24935553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.09108836" y3="0.83821998" z3="2.37776865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81881876" y3="0.33777122" z3="-4.33541845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77738893" y3="-0.64073843" z3="-4.5556813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39243971" y3="-1.81770871" z3="-5.18660339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.08879087" y3="-2.02189329" z3="-5.62890655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.86196547" y3="-1.0385307" z3="-5.39035185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.09331739" y3="1.24821696" z3="-3.79673878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80870606" y3="-0.51710268" z3="-4.2224466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.38476674" y3="-2.87851868" z3="-5.36986824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.17131321" y3="-2.95205912" z3="-6.13449274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8943011" y3="-1.20462419" z3="-5.69829934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.44211974" y3="-2.06157242" z3="5.05689119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30125172" y3="-3.84433046" z3="3.87290836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.11004126" y3="-3.7876825" z3="-6.12368112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42343026" y3="-2.79528364" z3="-4.74536804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02195624" y3="1.2160743" z3="-1.44228088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05059968" y3="1.59071577" z3="-2.41580904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37502633" y3="1.61613901" z3="-1.6183168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.76023251" y3="2.33816624" z3="-2.72150338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.10968187" y3="1.33008052" z3="-0.85915491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.80484494" y3="2.63786061" z3="-2.84791671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48615561" y3="2.31846552" z3="-3.55805848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.80333902" y3="2.68228382" z3="-3.70627863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75781622" y3="2.58204641" z3="-4.32844234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11597325" y3="3.23718292" z3="-4.59557499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.28392725" y3="3.10616363" z3="-3.23171191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.15639547" y3="3.50388609" z3="-4.00894432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.04678929" y3="4.12560704" z3="-2.5958205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.74418617" y3="5.45290899" z3="-2.77275928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.88363442" y3="3.84636" z3="-1.95358228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.34445827" y3="6.2177525" z3="-2.26741863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.8769718" y3="4.88609394" z3="-4.18528214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.65635702" y3="5.8433945" z3="-3.58934211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.01645719" y3="5.17290606" z3="-4.79808906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.42651403" y3="6.90627136" z3="-3.72449525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46025246" y3="-2.06272875" z3="-0.29095178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46444504" y3="-2.8791485" z3="-1.03285549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9935346" y3="-2.39991393" z3="0.61193712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05117136" y3="-1.23584673" z3="-0.72895896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1505778" y3="-1.37057075" z3="-1.18748071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.26901206" y3="-0.33467306" z3="-1.55668937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07407053" y3="-1.516598" z3="-0.99606955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41709705" y3="-2.03910878" z3="-2.02044508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3338,-.0052,-.1849;7.3695,.1846,.44;6.6232,.4449,-.317;4.6822,1.2095,-2.2254;4.3711,.3651,-1.1727;2.6989,.788,-3.6417;3.5692,1.706,-3.0839;1.2926,2.5145,-4.5445;1.5204,1.1725,-4.3472;.4064,2.8347,-5.1013;2.94,-.5415,-3.4557;3.0954,-.0722,-1.0032;2.4162,-1.1988,-2.0345;.9425,-1.0821,-1.8657;3.1242,-2.5218,-1.9036;-.1455,-3.5779,.6521;-.081,-5.353,-4.7252;-.2982,-5.0646,-3.6933;-.8673,-4.292,-1.0894;.7408,-4.6717,-2.8517;-1.6156,-5.0981,-3.2316;-1.9007,-4.7058,-1.9262;.4675,-4.3008,-1.5336;1.7754,-4.6358,-3.2016;-2.4263,-5.4019,-3.8981;-2.9368,-4.7015,-1.5814;-1.0409,-3.8096,.222;-2.1731,-3.5624,.8692;-3.0731,-4.0071,.4417;-2.1626,-3.4132,2.3349;-2.2142,-3.1963,5.1311;-3.3684,-3.5495,3.0389;-.9821,-3.1796,3.0561;-1.0052,-3.0715,4.4436;-3.3935,-3.4426,4.4265;-4.2936,-3.7485,2.492;-.0146,-3.1108,2.5531;-.0662,-2.9128,4.9821;-4.3399,-3.5589,4.9616;-2.232,-3.1197,6.2218;1.4036,-3.9499,-.6403;2.1749,-3.4807,-1.1062;.5134,.1462,-4.7261;-3.0442,-1.6213,.001;-2.833,-.8526,1.1446;-1.7546,-.2198,1.4493;-.238,.5831,1.1544;-.2574,1.4517,-.4907;1.052,-.7283,1.3845;-.1905,1.8073,2.572;-3.7943,-.7998,2.0551;-3.5295,-.17,3.2983;-.0882,.7243,-1.307;.5786,2.1761,-.5134;-1.1973,2.0062,-.6503;1.0304,-1.0924,2.4246;2.0476,-.3039,1.1798;.9179,-1.5628,.6779;-.2792,1.2937,3.5463;.7709,2.3545,2.5656;-1.0011,2.5556,2.4969;-2.6778,-.646,3.8096;-4.4425,-.3007,3.8947;-3.3219,.9032,3.155;4.8577,-.7964,.9844;4.4142,-2.1146,.8174;3.7673,-2.7796,1.8515;3.5849,-2.1158,3.0611;4.0895,-.8387,3.2859;4.733,-.1856,2.2394;4.4982,-2.589,-.1623;3.3533,-3.7781,1.7055;2.7243,-2.7263,4.0796;3.9304,-.3535,4.2494;5.0911,.8382,2.3778;-.8188,.3378,-4.3354;-1.7774,-.6407,-4.5557;-1.3924,-1.8177,-5.1866;-.0888,-2.0219,-5.6289;.862,-1.0385,-5.3904;-1.0933,1.2482,-3.7967;-2.8087,-.5171,-4.2224;-2.3848,-2.8785,-5.3699;.1713,-2.9521,-6.1345;1.8943,-1.2046,-5.6983;2.4421,-2.0616,5.0569;2.3013,-3.8443,3.8729;-2.11,-3.7877,-6.1237;-3.4234,-2.7953,-4.7454;7.022,1.2161,-1.4423;6.0506,1.5907,-2.4158;8.375,1.6161,-1.6183;8.7602,2.3382,-2.7215;9.1097,1.3301,-.8592;9.8048,2.6379,-2.8479;6.4862,2.3185,-3.5581;7.8033,2.6823,-3.7063;5.7578,2.582,-4.3284;8.116,3.2372,-4.5956;3.2839,3.1062,-3.2317;2.1564,3.5039,-4.0089;4.0468,4.1256,-2.5958;3.7442,5.4529,-2.7728;4.8836,3.8464,-1.9536;4.3445,6.2178,-2.2674;1.877,4.8861,-4.1853;2.6564,5.8434,-3.5893;1.0165,5.1729,-4.7981;2.4265,6.9063,-3.7245;-4.4603,-2.0627,-.291;-4.4644,-2.8791,-1.0329;-4.9935,-2.3999,.6119;-5.0512,-1.2358,-.729;-2.1506,-1.3706,-1.1875;-2.269,-.3347,-1.5567;-1.0741,-1.5166,-.9961;-2.4171,-2.0391,-2.0204;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650119538181</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006520256058 0.000807604621 0.016696113005 0.005337717473</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030397001 -0.003348817 0.000121716 0.000222814 0.000264512 0.000360321 0.000366045 0.000421409 0.000579110 0.000696674 0.000879272 0.000977551 0.001019532 0.001064438 0.001227089 0.001241701 0.001497599 0.001618584 0.001698341 0.001753593 0.001843219 0.002122639 0.002285202 0.002479626 0.002539290 0.002915828 0.003010432 0.003269180 0.003522913 0.003594507 0.004049957 0.004292496 0.004654750 0.004762096 0.005536047 0.005662196 0.005786481 0.005995871 0.006577696 0.006857168 0.007496410 0.007859681 0.008485806 0.008997455 0.009212845 0.009569284 0.010087057 0.010976251 0.011173527 0.011573002 0.012237471 0.012629227 0.013361125 0.013495031 0.014345483 0.014812689 0.015111767 0.015428804 0.015658202 0.016064237 0.016722018 0.017158039 0.018215771 0.018585138 0.019108955 0.020018361 0.020888500 0.021011460 0.021900884 0.022309174 0.022875618 0.024590336 0.025200736 0.026008469 0.026524648 0.027857388 0.028854780 0.029500329 0.031264545 0.031532742 0.032852575 0.033593573 0.034557993 0.035663983 0.037727344 0.038526285 0.039643505 0.040178908 0.041045703 0.043880848 0.044467700 0.044753500 0.046541811 0.048864403 0.049295114 0.050065780 0.050670960 0.051086701 0.052337273 0.052363369 0.052610300 0.052714512 0.054000069 0.054233592 0.055178320 0.055296741 0.056316039 0.056385494 0.056701152 0.057645767 0.059018404 0.059880340 0.060817648 0.061201498 0.062340928 0.062971366 0.063012022 0.064636436 0.064971838 0.066000225 0.066778263 0.068113945 0.069778947 0.072122693 0.073901704 0.075037033 0.077106770 0.082776275 0.084327747 0.085628086 0.086567653 0.087168665 0.089039718 0.090014077 0.092168185 0.094139357 0.094537117 0.095932782 0.096474327 0.097437863 0.098188449 0.099303288 0.099949506 0.101236749 0.101476669 0.102323599 0.102677778 0.103180790 0.103819381 0.105048594 0.106396197 0.106669706 0.108607961 0.108974978 0.109788359 0.111686145 0.112276239 0.114126462 0.115361124 0.116630388 0.118819013 0.120080536 0.121341148 0.122468081 0.124923316 0.125973410 0.126631441 0.131046291 0.134455152 0.135296370 0.142156277 0.142922614 0.145976036 0.146660596 0.149008033 0.150749310 0.152810284 0.153198060 0.156222669 0.159672890 0.160754661 0.172785880 0.173233741 0.177714887 0.183509715 0.184061856 0.188556031 0.188960419 0.192637090 0.193516120 0.197500068 0.199354076 0.203507376 0.206472248 0.206766223 0.209636845 0.210445376 0.213843117 0.214898274 0.216933349 0.218818830 0.224518832 0.225729292 0.231396400 0.234431689 0.234824144 0.235302042 0.243911452 0.255045920 0.256741921 0.261550957 0.266643689 0.278487163 0.282732228 0.286096522 0.289177659 0.293679264 0.300700471 0.305015890 0.305327996 0.306928998 0.314187992 0.314818956 0.321780369 0.327055266 0.329736464 0.348811401 0.349466452 0.351512173 0.354701122 0.356257656 0.361616913 0.361896265 0.378503036 0.382533391 0.389731043 0.409395082 0.423373518 0.428290203 0.450526160 0.466715600 0.469086384 0.475639805 0.481140805 0.481514106 0.488989651 0.504376574 0.511170136 0.533694253 0.565439887 0.571323978 0.588604506 0.592323234 0.601921955 0.605179086 0.639280203 0.643726458 0.645224550 0.671311660 0.674534859 0.684221775 0.690955408 0.691306689 0.698755356 0.703908867 0.714998417 0.740372707 0.743218671 0.751290518 0.760073388 0.771886707 0.778211994 0.808539360 0.809968160 0.813015686 0.818553972 0.820891605 0.823795487 0.829961359 0.832151770 0.832753608 0.842228783 0.845050734 0.846360146 0.857649370 0.863949943 0.864677684 0.871668052 0.875473868 0.883443336 0.888525450 0.888996868 0.891724764 0.898567937 0.918897188 0.922480524 0.931020686 0.933502791 0.964097923 0.975444038 0.984462711 0.999790969 1.012217527 1.025029134 1.040293940 1.048455970 1.055609701 1.063490170 1.085643399 1.086843566 1.100662008 1.105242400 1.111973354 1.113544503 1.123125099 1.135021930 1.139427463 1.170580970 1.171289932 1.175480072 1.181177096 1.186612654 1.194104315 1.215461209 1.221046000 1.265783887 1.297373459 1.314434116 1.326854960 1.329679540 1.330773603 1.331766211 1.334876505 1.341701401 1.344637034 1.357826548 1.374978260 1.381009757 1.382056676 1.389779192 1.418824920 1.421357604 1.551105888 1.660086686 1.772448834</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">101</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33243491" y3="-0.0018875" z3="-0.1856908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36841311" y3="0.18473963" z3="0.44017373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62316519" y3="0.44628301" z3="-0.31732463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68442552" y3="1.21199612" z3="-2.22785221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37105196" y3="0.36914352" z3="-1.17429729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.701744" y3="0.79140678" z3="-3.64580504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.57330544" y3="1.70915331" z3="-3.08824967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.30068409" y3="2.51622569" z3="-4.55514908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52372101" y3="1.1759104" z3="-4.35300736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.41368448" y3="2.83938392" z3="-5.10873327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93986958" y3="-0.53732264" z3="-3.45673931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09443752" y3="-0.06542444" z3="-1.0046378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41490209" y3="-1.19243981" z3="-2.03530806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94121899" y3="-1.07484132" z3="-1.86785226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12182336" y3="-2.51591562" z3="-1.90257851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14524651" y3="-3.58212747" z3="0.6556406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.07944151" y3="-5.34696881" z3="-4.72555739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29692643" y3="-5.06054176" z3="-3.69311883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86641804" y3="-4.29342951" z3="-1.0872348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7414892" y3="-4.66597277" z3="-2.85185502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61370994" y3="-5.09920177" z3="-3.23013812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89872349" y3="-4.7103906" z3="-1.92364112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.46891331" y3="-4.29862011" z3="-1.53281642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77564279" y3="-4.62564277" z3="-3.201662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.42391026" y3="-5.40379464" z3="-3.89644422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93532539" y3="-4.7093041" z3="-1.57731483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04063635" y3="-3.81319814" z3="0.22480342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17354897" y3="-3.56662074" z3="0.87148149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07230712" y3="-4.01301577" z3="0.44433801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16267312" y3="-3.41938474" z3="2.33777163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21494257" y3="-3.20306072" z3="5.13405316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36824593" y3="-3.55745455" z3="3.04152409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98237741" y3="-3.18515181" z3="3.05931527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00595716" y3="-3.07709607" z3="4.44686278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39386981" y3="-3.45059264" z3="4.42918628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2940217" y3="-3.7563392" z3="2.49435359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01568161" y3="-3.11375708" z3="2.55675728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06776092" y3="-2.91646381" z3="4.98537973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34073664" y3="-3.56702141" z3="4.96409264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23376203" y3="-3.12573879" z3="6.22470579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40745387" y3="-3.94850275" z3="-0.63963436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17202725" y3="-3.47348176" z3="-1.10415301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51415951" y3="0.15364242" z3="-4.72498021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04493715" y3="-1.62853276" z3="0.00396209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.83561162" y3="-0.85852541" z3="1.14819682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.75400751" y3="-0.22619612" z3="1.45283276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.2439694" y3="0.58085138" z3="1.15533998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.26983415" y3="1.44830088" z3="-0.48861016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.04692237" y3="-0.72957995" z3="1.37975605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.19352236" y3="1.80254574" z3="2.57463468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.79881313" y3="-0.80546956" z3="2.05766223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.53677246" y3="-0.17672992" z3="3.30217262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.08869094" y3="0.73234683" z3="-1.30370427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.56195011" y3="2.17713633" z3="-0.50580601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.21212351" y3="2.00406505" z3="-0.65047074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02520744" y3="-1.0963629" z3="2.42007221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0476279" y3="-0.3099332" z3="1.17428342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.9077564" y3="-1.56518308" z3="0.67401635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.27721326" y3="1.2881084" z3="3.54787838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.76432813" y3="2.35206644" z3="2.56714407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.0055065" y3="2.54610622" z3="2.50307974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.68461221" y3="-0.65336841" z3="3.81381493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.45072931" y3="-0.30957534" z3="3.89624326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.3315258" y3="0.89695499" z3="3.16011601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85432236" y3="-0.79124763" z3="0.98394085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41256792" y3="-2.11025093" z3="0.81728022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76582111" y3="-2.77522748" z3="1.85159444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.58096021" y3="-2.11020477" z3="3.06040206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.08285627" y3="-0.8316326" z3="3.28458812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72665605" y3="-0.17862122" z3="2.23817247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4986748" y3="-2.58545046" z3="-0.16187626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35423295" y3="-3.77480762" z3="1.70624668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.72088289" y3="-2.72159659" z3="4.07888995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.92133966" y3="-0.3455963" z3="4.24745651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08286736" y3="0.8461282" z3="2.37618364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81694623" y3="0.3467036" z3="-4.33153517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77704643" y3="-0.6330967" z3="-4.55020519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39482442" y3="-1.81121137" z3="-5.18017176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.09199379" y3="-2.016782" z3="-5.62480436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85977962" y3="-1.03234659" z3="-5.38734826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0911862" y3="1.25824947" z3="-3.79338829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80525697" y3="-0.50504147" z3="-4.21565947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.38855312" y3="-2.87246432" z3="-5.36064174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.16586307" y3="-2.9477259" z3="-6.12962314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.89322677" y3="-1.19693178" z3="-5.70042455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.44033472" y3="-2.05772425" z3="5.05811175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.29675921" y3="-3.83962494" z3="3.87032159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.11684863" y3="-3.78145194" z3="-6.11611804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42489934" y3="-2.78915336" z3="-4.73235345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02418617" y3="1.21586839" z3="-1.44323852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05420544" y3="1.59128632" z3="-2.41783355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.37800036" y3="1.61171055" z3="-1.61924214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.76533975" y3="2.33060911" z3="-2.72321487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.11103184" y3="1.32346652" z3="-0.85959661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.81014588" y3="2.62573896" z3="-2.84978302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49215395" y3="2.31618079" z3="-3.56089874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.80993779" y3="2.67586107" z3="-3.70898301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.76476504" y3="2.57928195" z3="-4.33242968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12421661" y3="3.22798711" z3="-4.59896395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.29242247" y3="3.10897413" z3="-3.24044737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.16733338" y3="3.50510926" z3="-4.02158255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.05594034" y3="4.12937202" z3="-2.60397852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.75225487" y3="5.46008676" z3="-2.77847877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.8912347" y3="3.85018107" z3="-1.96005959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.35602236" y3="6.22164807" z3="-2.27827118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.8894493" y3="4.88888194" z3="-4.19894183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.66626519" y3="5.85033998" z3="-3.59738437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.03046488" y3="5.1749618" z3="-4.81370505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.44232834" y3="6.91027364" z3="-3.73817919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.459361" y3="-2.07179223" z3="-0.2908946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46012803" y3="-2.88631478" z3="-1.03471958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99296243" y3="-2.41253812" z3="0.61023669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05156254" y3="-1.24519546" z3="-0.7277384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15080312" y3="-1.3751877" z3="-1.18355053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27076366" y3="-0.33919587" z3="-1.55224118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07463702" y3="-1.51863771" z3="-0.99109236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41467467" y3="-2.04338692" z3="-2.01714364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3324,-.0019,-.1857;7.3684,.1847,.4402;6.6232,.4463,-.3173;4.6844,1.212,-2.2279;4.3711,.3691,-1.1743;2.7017,.7914,-3.6458;3.5733,1.7092,-3.0882;1.3007,2.5162,-4.5551;1.5237,1.1759,-4.353;.4137,2.8394,-5.1087;2.9399,-.5373,-3.4567;3.0944,-.0654,-1.0046;2.4149,-1.1924,-2.0353;.9412,-1.0748,-1.8679;3.1218,-2.5159,-1.9026;-.1452,-3.5821,.6556;-.0794,-5.347,-4.7256;-.2969,-5.0605,-3.6931;-.8664,-4.2934,-1.0872;.7415,-4.666,-2.8519;-1.6137,-5.0992,-3.2301;-1.8987,-4.7104,-1.9236;.4689,-4.2986,-1.5328;1.7756,-4.6256,-3.2017;-2.4239,-5.4038,-3.8964;-2.9353,-4.7093,-1.5773;-1.0406,-3.8132,.2248;-2.1735,-3.5666,.8715;-3.0723,-4.013,.4443;-2.1627,-3.4194,2.3378;-2.2149,-3.2031,5.1341;-3.3682,-3.5575,3.0415;-.9824,-3.1852,3.0593;-1.006,-3.0771,4.4469;-3.3939,-3.4506,4.4292;-4.294,-3.7563,2.4944;-.0157,-3.1138,2.5568;-.0678,-2.9165,4.9854;-4.3407,-3.567,4.9641;-2.2338,-3.1257,6.2247;1.4075,-3.9485,-.6396;2.172,-3.4735,-1.1042;.5142,.1536,-4.725;-3.0449,-1.6285,.004;-2.8356,-.8585,1.1482;-1.754,-.2262,1.4528;-.244,.5809,1.1553;-.2698,1.4483,-.4886;1.0469,-.7296,1.3798;-.1935,1.8025,2.5746;-3.7988,-.8055,2.0577;-3.5368,-.1767,3.3022;-.0887,.7323,-1.3037;.562,2.1771,-.5058;-1.2121,2.0041,-.6505;1.0252,-1.0964,2.4201;2.0476,-.3099,1.1743;.9078,-1.5652,.674;-.2772,1.2881,3.5479;.7643,2.3521,2.5671;-1.0055,2.5461,2.5031;-2.6846,-.6534,3.8138;-4.4507,-.3096,3.8962;-3.3315,.897,3.1601;4.8543,-.7912,.9839;4.4126,-2.1103,.8173;3.7658,-2.7752,1.8516;3.581,-2.1102,3.0604;4.0829,-.8316,3.2846;4.7267,-.1786,2.2382;4.4987,-2.5855,-.1619;3.3542,-3.7748,1.7062;2.7209,-2.7216,4.0789;3.9213,-.3456,4.2475;5.0829,.8461,2.3762;-.8169,.3467,-4.3315;-1.777,-.6331,-4.5502;-1.3948,-1.8112,-5.1802;-.092,-2.0168,-5.6248;.8598,-1.0323,-5.3873;-1.0912,1.2582,-3.7934;-2.8053,-.505,-4.2157;-2.3886,-2.8725,-5.3606;.1659,-2.9477,-6.1296;1.8932,-1.1969,-5.7004;2.4403,-2.0577,5.0581;2.2968,-3.8396,3.8703;-2.1168,-3.7815,-6.1161;-3.4249,-2.7892,-4.7324;7.0242,1.2159,-1.4432;6.0542,1.5913,-2.4178;8.378,1.6117,-1.6192;8.7653,2.3306,-2.7232;9.111,1.3235,-.8596;9.8101,2.6257,-2.8498;6.4922,2.3162,-3.5609;7.8099,2.6759,-3.709;5.7648,2.5793,-4.3324;8.1242,3.228,-4.599;3.2924,3.109,-3.2404;2.1673,3.5051,-4.0216;4.0559,4.1294,-2.604;3.7523,5.4601,-2.7785;4.8912,3.8502,-1.9601;4.356,6.2216,-2.2783;1.8894,4.8889,-4.1989;2.6663,5.8503,-3.5974;1.0305,5.175,-4.8137;2.4423,6.9103,-3.7382;-4.4594,-2.0718,-.2909;-4.4601,-2.8863,-1.0347;-4.993,-2.4125,.6102;-5.0516,-1.2452,-.7277;-2.1508,-1.3752,-1.1836;-2.2708,-.3392,-1.5522;-1.0746,-1.5186,-.9911;-2.4147,-2.0434,-2.0171;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650150061127</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004547782395 0.000741018575 0.016044366710 0.005338483660</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030402984 -0.002726033 0.000132226 0.000231225 0.000264185 0.000360316 0.000366969 0.000420683 0.000578697 0.000697045 0.000879350 0.000977586 0.001020561 0.001065418 0.001227552 0.001248935 0.001502005 0.001624231 0.001699590 0.001753803 0.001844496 0.002139237 0.002290075 0.002481057 0.002560382 0.002915905 0.003010141 0.003275468 0.003547837 0.003644282 0.004050155 0.004317436 0.004658074 0.004773372 0.005535753 0.005662123 0.005786371 0.005996541 0.006577887 0.006882476 0.007503268 0.007866267 0.008486035 0.009000349 0.009213462 0.009570836 0.010087343 0.010976285 0.011197923 0.011711026 0.012253631 0.012673918 0.013363318 0.013502373 0.014353631 0.014823767 0.015113317 0.015429884 0.015666827 0.016094205 0.016746259 0.017205039 0.018228771 0.018585620 0.019131887 0.020019189 0.020949688 0.021011573 0.021960524 0.022478117 0.022877287 0.024590769 0.025217126 0.026008547 0.026532590 0.027861178 0.028858891 0.029595205 0.031289692 0.031535792 0.032854097 0.033616510 0.034604167 0.035678195 0.037730541 0.038528320 0.039643749 0.040210415 0.041054388 0.043880884 0.044514673 0.044792441 0.046541642 0.048862989 0.049298272 0.050108752 0.050687884 0.051086196 0.052339435 0.052364201 0.052621689 0.052721099 0.054004921 0.054249314 0.055181103 0.055330374 0.056316746 0.056386104 0.056701910 0.057653444 0.059019095 0.059921905 0.060829947 0.061208096 0.062340420 0.062998804 0.063186936 0.064665907 0.064971844 0.066002501 0.066948717 0.068113145 0.069891621 0.072177414 0.073902995 0.075047306 0.077118278 0.082776606 0.084359784 0.085702260 0.086577134 0.087185557 0.089110809 0.090033406 0.092190838 0.094192625 0.094544087 0.095938828 0.096488880 0.097439256 0.098187594 0.099309542 0.099959262 0.101240644 0.101520305 0.102429940 0.102686070 0.103183753 0.103828260 0.105194352 0.106424648 0.106702768 0.108659028 0.108994977 0.109791908 0.111724455 0.112276145 0.114152096 0.115786058 0.117012915 0.118977783 0.120077062 0.121343285 0.122551313 0.124926292 0.125981144 0.126640455 0.131069608 0.134462939 0.135318836 0.142170842 0.142930665 0.145973958 0.146704548 0.149009760 0.150771106 0.152829018 0.153378436 0.156233679 0.159674021 0.160841332 0.172786784 0.173266396 0.177820979 0.183518696 0.184135954 0.188646500 0.189132712 0.192719745 0.193516394 0.197535300 0.199366621 0.203663568 0.206474699 0.206766344 0.209636836 0.210444626 0.213894196 0.215090966 0.216932981 0.218908873 0.224524856 0.225775516 0.231422787 0.234452704 0.234835853 0.235304673 0.243944468 0.255047509 0.256741777 0.261592182 0.266710962 0.278487404 0.282732913 0.286096902 0.289220054 0.293688139 0.300747838 0.305088979 0.305330297 0.306930306 0.314188552 0.314842359 0.321790104 0.327076927 0.329746221 0.348832076 0.349469118 0.351518118 0.354724053 0.356449632 0.361627418 0.361909879 0.378518261 0.382942921 0.389748416 0.409416264 0.423389809 0.428290364 0.450532395 0.466717476 0.469118237 0.475639802 0.481153675 0.481636942 0.488988122 0.504509341 0.511183103 0.533696249 0.565440375 0.571369955 0.588991429 0.592334926 0.601970252 0.605185050 0.639279980 0.644059093 0.645458925 0.671851525 0.674565209 0.684225191 0.691115178 0.691347197 0.698762991 0.703908838 0.714999021 0.740413899 0.743217660 0.751330265 0.760274626 0.771886950 0.778216825 0.808824068 0.809989117 0.813020772 0.819196019 0.820900672 0.823919397 0.830006898 0.832223018 0.833070477 0.842281713 0.845050766 0.846360614 0.857651593 0.863969115 0.864682820 0.871689798 0.876162783 0.883443343 0.888859057 0.890256986 0.891729422 0.898973042 0.918961639 0.922481352 0.931061606 0.933525970 0.964159915 0.975445051 0.984474494 0.999831848 1.012223153 1.025091144 1.040294133 1.048472067 1.055615826 1.063616170 1.085666276 1.087002728 1.100876067 1.105242358 1.111973512 1.113545574 1.123125188 1.135022059 1.139438032 1.170590120 1.172405860 1.175891986 1.181234174 1.186900011 1.194106656 1.215878501 1.221371600 1.265899821 1.297440139 1.314560584 1.326887100 1.329697640 1.331750943 1.331786772 1.334888513 1.341712960 1.344637699 1.357826480 1.374978340 1.381021001 1.382150629 1.389817883 1.418877777 1.421392083 1.551108544 1.660087191 1.772453432</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">102</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33144294" y3="0.0017552" z3="-0.18574249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36771582" y3="0.18370123" z3="0.43995416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62314118" y3="0.44582912" z3="-0.31804991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68676868" y3="1.21370486" z3="-2.22986738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37114221" y3="0.37354114" z3="-1.17506897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70367543" y3="0.79512854" z3="-3.64752185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.5767461" y3="1.71192692" z3="-3.09119407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.30511345" y3="2.52278576" z3="-4.55800988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52680396" y3="1.18093767" z3="-4.35537118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.41972449" y3="2.84479971" z3="-5.11491934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93961788" y3="-0.53414722" z3="-3.4572852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09356632" y3="-0.0588812" z3="-1.005813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41425139" y3="-1.18736033" z3="-2.03499973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94061295" y3="-1.06985516" z3="-1.86793507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12169612" y3="-2.5105203" z3="-1.90057506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1445927" y3="-3.58482141" z3="0.65737175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.07655555" y3="-5.34050565" z3="-4.7261108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29411405" y3="-5.05671532" z3="-3.69305885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.86409035" y3="-4.29628916" z3="-1.08611639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74340394" y3="-4.66016257" z3="-2.85170871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.61044579" y3="-5.09997868" z3="-3.22996142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89639126" y3="-4.71343117" z3="-1.92293812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47064459" y3="-4.29631023" z3="-1.53186401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77703565" y3="-4.6161016" z3="-3.20248827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.41890815" y3="-5.40686742" z3="-3.89650144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.93314491" y3="-4.71431942" z3="-1.57653722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03920166" y3="-3.81759532" z3="0.22647707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17209154" y3="-3.57281183" z3="0.87324716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07131392" y3="-4.01881996" z3="0.4454674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16234098" y3="-3.42493034" z3="2.33926963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21493362" y3="-3.21064631" z3="5.13567831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36789227" y3="-3.56547146" z3="3.04282134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98305732" y3="-3.18788768" z3="3.06087922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00667112" y3="-3.0809748" z3="4.44852031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39346994" y3="-3.45988873" z3="4.43059609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.29291687" y3="-3.76614093" z3="2.4955738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01573985" y3="-3.11531119" z3="2.5582699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06814738" y3="-2.91969474" z3="4.98730941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33939604" y3="-3.57968903" z3="4.96536883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23326282" y3="-3.13475357" z3="6.22650358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40599426" y3="-3.94274437" z3="-0.63859402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17422864" y3="-3.46905054" z3="-1.10401978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51471813" y3="0.15855198" z3="-4.72629985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04582602" y3="-1.63414217" z3="0.00472811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.83993542" y3="-0.86450969" z3="1.14928488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.76578106" y3="-0.22553351" z3="1.45622765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.25031892" y3="0.57844857" z3="1.15646839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.27793821" y3="1.45110883" z3="-0.48606752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.04184538" y3="-0.7326017" z3="1.37928427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.1987974" y3="1.79940298" z3="2.57630485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.80322875" y3="-0.81624594" z3="2.05855215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.54273404" y3="-0.1872482" z3="3.30365561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.10170717" y3="0.72810868" z3="-1.30445185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.55125177" y3="2.18304973" z3="-0.50581551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.22286363" y3="1.99760272" z3="-0.64463982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02339899" y3="-1.09694885" z3="2.41957048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0360906" y3="-0.30769889" z3="1.17051645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.90475946" y3="-1.56741884" z3="0.67344564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.28428967" y3="1.28408466" z3="3.5495448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.76311883" y3="2.3459163" z3="2.56819524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.00900737" y3="2.54842186" z3="2.50485679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.68932178" y3="-0.66016416" z3="3.81529543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.4558069" y3="-0.32364941" z3="3.89809701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.3409142" y3="0.88714543" z3="3.16310436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85160406" y3="-0.78611609" z3="0.98438596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4124109" y3="-2.10600175" z3="0.81980852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7652608" y3="-2.77014806" z3="1.85435857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57771114" y3="-2.10329109" z3="3.06151734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.07621201" y3="-0.82323148" z3="3.2834877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72012944" y3="-0.17111576" z3="2.23665614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50093581" y3="-2.58294408" z3="-0.15796113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35517766" y3="-3.77065134" z3="1.71017934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71844164" y3="-2.71486979" z3="4.08053284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.91222695" y3="-0.33553497" z3="4.24489032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07413037" y3="0.85444127" z3="2.37277006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81502814" y3="0.35465624" z3="-4.32967097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77648091" y3="-0.62279974" z3="-4.54325574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.39686705" y3="-1.80249595" z3="-5.17388389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.09595253" y3="-2.01063149" z3="-5.62018481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85763534" y3="-1.02840294" z3="-5.38850989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08500876" y3="1.26708282" z3="-3.79304899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80772578" y3="-0.49785792" z3="-4.20595748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.39225396" y3="-2.86238311" z3="-5.350473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.16059596" y3="-2.94260891" z3="-6.12552537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.88868279" y3="-1.19657915" z3="-5.70113064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.43573055" y3="-2.05045709" z3="5.05802034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.29730244" y3="-3.83378074" z3="3.87417515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.12505195" y3="-3.77112167" z3="-6.10717004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42580276" y3="-2.77836469" z3="-4.71760255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02619311" y3="1.2123956" z3="-1.44508314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0571991" y3="1.58882451" z3="-2.4202913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.38133721" y3="1.60515467" z3="-1.62144035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.77070596" y3="2.32146172" z3="-2.72654087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.11394496" y3="1.31673385" z3="-0.8612337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.81677876" y3="2.61477752" z3="-2.85331077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49713373" y3="2.31138178" z3="-3.56428969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.81614027" y3="2.6679967" z3="-3.712728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7707089" y3="2.5763227" z3="-4.33599796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.13208197" y3="3.21860739" z3="-4.60340224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.29699363" y3="3.11319473" z3="-3.24325153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.1726991" y3="3.51156787" z3="-4.02443593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.06369679" y3="4.13166151" z3="-2.6103696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.76635173" y3="5.46004263" z3="-2.79202807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.89819737" y3="3.85194597" z3="-1.9654713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.37206672" y3="6.22149296" z3="-2.2932376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.89859889" y3="4.89517375" z3="-4.20513743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.6809942" y3="5.85209662" z3="-3.61109976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.04161946" y3="5.18132278" z3="-4.82259651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.45820694" y3="6.9133244" z3="-3.75312939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46003528" y3="-2.08068816" z3="-0.29024981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46140289" y3="-2.89679288" z3="-1.03445156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9933426" y3="-2.42135117" z3="0.61229734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05363321" y3="-1.25512874" z3="-0.72710254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1513202" y3="-1.37862589" z3="-1.18166896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27231715" y3="-0.34221191" z3="-1.54929532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07510375" y3="-1.5213821" z3="-0.98780427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41320695" y3="-2.04653775" z3="-2.01601013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3314,.0018,-.1857;7.3677,.1837,.44;6.6231,.4458,-.318;4.6868,1.2137,-2.2299;4.3711,.3735,-1.1751;2.7037,.7951,-3.6475;3.5767,1.7119,-3.0912;1.3051,2.5228,-4.558;1.5268,1.1809,-4.3554;.4197,2.8448,-5.1149;2.9396,-.5341,-3.4573;3.0936,-.0589,-1.0058;2.4143,-1.1874,-2.035;.9406,-1.0699,-1.8679;3.1217,-2.5105,-1.9006;-.1446,-3.5848,.6574;-.0766,-5.3405,-4.7261;-.2941,-5.0567,-3.6931;-.8641,-4.2963,-1.0861;.7434,-4.6602,-2.8517;-1.6104,-5.1,-3.23;-1.8964,-4.7134,-1.9229;.4706,-4.2963,-1.5319;1.777,-4.6161,-3.2025;-2.4189,-5.4069,-3.8965;-2.9331,-4.7143,-1.5765;-1.0392,-3.8176,.2265;-2.1721,-3.5728,.8732;-3.0713,-4.0188,.4455;-2.1623,-3.4249,2.3393;-2.2149,-3.2106,5.1357;-3.3679,-3.5655,3.0428;-.9831,-3.1879,3.0609;-1.0067,-3.081,4.4485;-3.3935,-3.4599,4.4306;-4.2929,-3.7661,2.4956;-.0157,-3.1153,2.5583;-.0681,-2.9197,4.9873;-4.3394,-3.5797,4.9654;-2.2333,-3.1348,6.2265;1.406,-3.9427,-.6386;2.1742,-3.4691,-1.104;.5147,.1586,-4.7263;-3.0458,-1.6341,.0047;-2.8399,-.8645,1.1493;-1.7658,-.2255,1.4562;-.2503,.5784,1.1565;-.2779,1.4511,-.4861;1.0418,-.7326,1.3793;-.1988,1.7994,2.5763;-3.8032,-.8162,2.0586;-3.5427,-.1872,3.3037;-.1017,.7281,-1.3045;.5513,2.183,-.5058;-1.2229,1.9976,-.6446;1.0234,-1.0969,2.4196;2.0361,-.3077,1.1705;.9048,-1.5674,.6734;-.2843,1.2841,3.5495;.7631,2.3459,2.5682;-1.009,2.5484,2.5049;-2.6893,-.6602,3.8153;-4.4558,-.3236,3.8981;-3.3409,.8871,3.1631;4.8516,-.7861,.9844;4.4124,-2.106,.8198;3.7653,-2.7701,1.8544;3.5777,-2.1033,3.0615;4.0762,-.8232,3.2835;4.7201,-.1711,2.2367;4.5009,-2.5829,-.158;3.3552,-3.7707,1.7102;2.7184,-2.7149,4.0805;3.9122,-.3355,4.2449;5.0741,.8544,2.3728;-.815,.3547,-4.3297;-1.7765,-.6228,-4.5433;-1.3969,-1.8025,-5.1739;-.096,-2.0106,-5.6202;.8576,-1.0284,-5.3885;-1.085,1.2671,-3.793;-2.8077,-.4979,-4.206;-2.3923,-2.8624,-5.3505;.1606,-2.9426,-6.1255;1.8887,-1.1966,-5.7011;2.4357,-2.0505,5.058;2.2973,-3.8338,3.8742;-2.1251,-3.7711,-6.1072;-3.4258,-2.7784,-4.7176;7.0262,1.2124,-1.4451;6.0572,1.5888,-2.4203;8.3813,1.6052,-1.6214;8.7707,2.3215,-2.7265;9.1139,1.3167,-.8612;9.8168,2.6148,-2.8533;6.4971,2.3114,-3.5643;7.8161,2.668,-3.7127;5.7707,2.5763,-4.336;8.1321,3.2186,-4.6034;3.297,3.1132,-3.2433;2.1727,3.5116,-4.0244;4.0637,4.1317,-2.6104;3.7664,5.46,-2.792;4.8982,3.8519,-1.9655;4.3721,6.2215,-2.2932;1.8986,4.8952,-4.2051;2.681,5.8521,-3.6111;1.0416,5.1813,-4.8226;2.4582,6.9133,-3.7531;-4.46,-2.0807,-.2902;-4.4614,-2.8968,-1.0345;-4.9933,-2.4214,.6123;-5.0536,-1.2551,-.7271;-2.1513,-1.3786,-1.1817;-2.2723,-.3422,-1.5493;-1.0751,-1.5214,-.9878;-2.4132,-2.0465,-2.016;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650183158114</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003366539470 0.000638178200 0.015667648258 0.005336961167</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030402595 -0.002243612 0.000133917 0.000227908 0.000268192 0.000362939 0.000366717 0.000424075 0.000578969 0.000698699 0.000879288 0.000978438 0.001035316 0.001065646 0.001229004 0.001263630 0.001504666 0.001626851 0.001703579 0.001756243 0.001851520 0.002146371 0.002291293 0.002481080 0.002591954 0.002920167 0.003009974 0.003277414 0.003550027 0.003673563 0.004050143 0.004346474 0.004665007 0.004775619 0.005539898 0.005669080 0.005786449 0.005998574 0.006579835 0.006898526 0.007518898 0.007872217 0.008486269 0.009000437 0.009214514 0.009571263 0.010089112 0.010976601 0.011200891 0.011757472 0.012297255 0.012739499 0.013364613 0.013514427 0.014383094 0.014855664 0.015129363 0.015430663 0.015692481 0.016136352 0.016748685 0.017219841 0.018230939 0.018585664 0.019139203 0.020019631 0.020999968 0.021013082 0.021987899 0.022603237 0.022877135 0.024598462 0.025217061 0.026014254 0.026539083 0.027874361 0.028877405 0.029648678 0.031349324 0.031546290 0.032869154 0.033631595 0.034680479 0.035692962 0.037735504 0.038528347 0.039645593 0.040221859 0.041061675 0.043882592 0.044544134 0.044820445 0.046552155 0.048876745 0.049315718 0.050127979 0.050707787 0.051091521 0.052339528 0.052364164 0.052639674 0.052740824 0.054016358 0.054258143 0.055182222 0.055331088 0.056327060 0.056388868 0.056712678 0.057657353 0.059027860 0.059927369 0.060833048 0.061215226 0.062348059 0.063000215 0.063321672 0.064683025 0.064971982 0.066015162 0.066946938 0.068122866 0.070064379 0.072189278 0.073904586 0.075063261 0.077121735 0.082776984 0.084385642 0.085766139 0.086580531 0.087185421 0.089116678 0.090052710 0.092189591 0.094211927 0.094545686 0.095938322 0.096496437 0.097448170 0.098189224 0.099317372 0.099972378 0.101240339 0.101551245 0.102457795 0.102692004 0.103185941 0.103840426 0.105259802 0.106440775 0.106737191 0.108692395 0.109021023 0.109805287 0.111728360 0.112293860 0.114175099 0.115899115 0.117337513 0.119318796 0.120097497 0.121351389 0.122707236 0.124925856 0.125988046 0.126644744 0.131090762 0.134467522 0.135328889 0.142170706 0.142942399 0.145974597 0.146718346 0.149026755 0.150773214 0.152841138 0.153528349 0.156249671 0.159681675 0.160888949 0.172786838 0.173302264 0.177847344 0.183545012 0.184207609 0.188678131 0.189398576 0.192768672 0.193520078 0.197565672 0.199374152 0.203798670 0.206483256 0.206766539 0.209637130 0.210451060 0.213901924 0.215237209 0.216941143 0.218945813 0.224528952 0.225820226 0.231437282 0.234460921 0.234838137 0.235304623 0.243974319 0.255049388 0.256745613 0.261611183 0.266835515 0.278488187 0.282733108 0.286097189 0.289334696 0.293697677 0.300750744 0.305123116 0.305338038 0.306930863 0.314190921 0.314863175 0.321790371 0.327081372 0.329761148 0.348890735 0.349470602 0.351552764 0.354798385 0.356613908 0.361627340 0.361975798 0.378552207 0.383196796 0.389831091 0.409524830 0.423396813 0.428301244 0.450544040 0.466720705 0.469121099 0.475639827 0.481168703 0.481684281 0.489034306 0.504530777 0.511210350 0.533715767 0.565440658 0.571369288 0.589091397 0.592336347 0.602004491 0.605185053 0.639302497 0.644175419 0.645679991 0.672361326 0.674594952 0.684225137 0.691226503 0.691450119 0.698767747 0.703910195 0.715018524 0.740438264 0.743311512 0.751372669 0.760444466 0.771887199 0.778223091 0.809025418 0.810026269 0.813025265 0.819810456 0.820908420 0.824105841 0.830037272 0.832239184 0.833385443 0.842283834 0.845051306 0.846365911 0.857653383 0.863992897 0.864685949 0.871743666 0.876817269 0.883449032 0.888867190 0.891478183 0.891812900 0.899370318 0.919026642 0.922482249 0.931120040 0.933537675 0.964190972 0.975447475 0.984479767 0.999841877 1.012225846 1.025098079 1.040294166 1.048480061 1.055616030 1.063693428 1.085681143 1.087148455 1.101240648 1.105249227 1.111974781 1.113572742 1.123125536 1.135022073 1.139455612 1.170590650 1.172578710 1.176146799 1.181307586 1.187134790 1.194107259 1.216114327 1.221728730 1.265992379 1.297458527 1.314579617 1.326896910 1.329704008 1.331758549 1.332540175 1.334898935 1.341720394 1.344637906 1.357843389 1.374978454 1.381037820 1.382227850 1.389928517 1.418924940 1.421420558 1.551108560 1.660088745 1.772470854</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">103</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33068304" y3="0.00503382" z3="-0.18604114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36735532" y3="0.1828094" z3="0.43996753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62369985" y3="0.44563208" z3="-0.31868639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.68971642" y3="1.21453271" z3="-2.23275323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37164555" y3="0.37738351" z3="-1.17625989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70577265" y3="0.79827348" z3="-3.64925063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58161386" y3="1.71357912" z3="-3.0958875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.31028788" y3="2.52729422" z3="-4.56140813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52891031" y3="1.18606092" z3="-4.35586225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.42448651" y3="2.85155368" z3="-5.11630781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93951765" y3="-0.5311861" z3="-3.45727154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09314514" y3="-0.05186352" z3="-1.00657963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41373756" y3="-1.18186832" z3="-2.03408187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93998967" y3="-1.06419214" z3="-1.86774456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12145717" y3="-2.50459278" z3="-1.8975109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14359587" y3="-3.58766282" z3="0.65890773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.07296176" y3="-5.33543748" z3="-4.72755348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.29119183" y3="-5.05273598" z3="-3.69422513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8628472" y3="-4.29587981" z3="-1.08609817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74614378" y3="-4.65628156" z3="-2.85228496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.60781442" y3="-5.09802261" z3="-3.23098492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89379186" y3="-4.71454733" z3="-1.92318536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47192656" y3="-4.29289182" z3="-1.53227862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78033437" y3="-4.61155366" z3="-3.20291117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.41771322" y3="-5.40340548" z3="-3.8979619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.92914141" y3="-4.72108766" z3="-1.57665337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03824376" y3="-3.82028541" z3="0.22741941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17171122" y3="-3.57740977" z3="0.87425064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06958503" y3="-4.02487156" z3="0.44614807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16176559" y3="-3.4308138" z3="2.34040325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21506915" y3="-3.21764892" z3="5.13678441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36661319" y3="-3.57527357" z3="3.04404786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9826338" y3="-3.19128812" z3="3.06199442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0066421" y3="-3.08499943" z3="4.44963135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39265477" y3="-3.47018223" z3="4.43180247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.29073867" y3="-3.77875719" z3="2.49680804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01632704" y3="-3.11441069" z3="2.55917717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06938702" y3="-2.92009806" z3="4.9882575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33876039" y3="-3.59200546" z3="4.96675465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23388884" y3="-3.1421331" z3="6.2275696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40779032" y3="-3.93962492" z3="-0.63856263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1741643" y3="-3.46357972" z3="-1.10266881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5153896" y3="0.16434769" z3="-4.72544274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04844892" y3="-1.63974901" z3="0.00680212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.84393094" y3="-0.87120703" z3="1.1523036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.76741118" y3="-0.23228237" z3="1.45938136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.25834637" y3="0.57671588" z3="1.15817665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.28908375" y3="1.4472861" z3="-0.48481569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.03685378" y3="-0.73007694" z3="1.37837667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.20670782" y3="1.79748273" z3="2.57839896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8074775" y3="-0.82597357" z3="2.06124187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.55030446" y3="-0.19725236" z3="3.30625717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1020893" y3="0.73277735" z3="-1.30097134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.5368424" y3="2.18324442" z3="-0.50045037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.23603348" y3="1.99649543" z3="-0.64649728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02052254" y3="-1.0954879" z3="2.41878549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.03436647" y3="-0.30641895" z3="1.16938199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89960734" y3="-1.56637505" z3="0.67369313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.28877385" y3="1.28228984" z3="3.55163103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.75071495" y3="2.34786129" z3="2.56946245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.01950455" y3="2.54047365" z3="2.50856033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.69498403" y3="-0.66731736" z3="3.81753355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.46286912" y3="-0.33788325" z3="3.90049969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.35260409" y3="0.8779323" z3="3.16535625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84901514" y3="-0.78039129" z3="0.98495774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41116719" y3="-2.10107343" z3="0.82204958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7642627" y3="-2.76433492" z3="1.85737425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57521054" y3="-2.09570204" z3="3.0634775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0717404" y3="-0.81439331" z3="3.28372754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.7157926" y3="-0.16323353" z3="2.23633718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50051578" y3="-2.57920256" z3="-0.15545936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.356108" y3="-3.76572121" z3="1.71506434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71679127" y3="-2.70716508" z3="4.08329028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90649267" y3="-0.3252789" z3="4.24441925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06850022" y3="0.86307215" z3="2.37113886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81385488" y3="0.3615974" z3="-4.32749518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77724897" y3="-0.61553645" z3="-4.53834575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.40069435" y3="-1.79593101" z3="-5.16648686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1004341" y3="-2.00547553" z3="-5.61800465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8551515" y3="-1.02386144" z3="-5.38752195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08317043" y3="1.27508732" z3="-3.78991661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80252211" y3="-0.48286409" z3="-4.19942005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.39718441" y3="-2.85475222" z3="-5.33935167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.15262975" y3="-2.9380786" z3="-6.1212485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.88591888" y3="-1.19317134" z3="-5.70337902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.43246486" y3="-2.04148911" z3="5.05964009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.29793832" y3="-3.82751522" z3="3.87863092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.13346515" y3="-3.76284634" z3="-6.09875941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42789354" y3="-2.77063128" z3="-4.7019349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.02906876" y3="1.20884621" z3="-1.44713348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06124384" y3="1.58573576" z3="-2.42331722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.38522979" y3="1.59739004" z3="-1.62412752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.77672226" y3="2.31100026" z3="-2.73040658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.11698938" y3="1.30876687" z3="-0.86321215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.82349539" y3="2.6013706" z3="-2.85759825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50315735" y3="2.30435112" z3="-3.56872078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.82307722" y3="2.65740245" z3="-3.71758841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.77720982" y3="2.56894312" z3="-4.34111574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.14048501" y3="3.20535432" z3="-4.60922499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.30701769" y3="3.113589" z3="-3.25371183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.18202389" y3="3.51324459" z3="-4.03363142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.07545268" y3="4.13263378" z3="-2.62204939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.77640126" y3="5.46398219" z3="-2.80035584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.91017741" y3="3.85197681" z3="-1.97781957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.38107235" y3="6.2269913" z3="-2.2993111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.90932566" y3="4.89735846" z3="-4.21549081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.69066062" y3="5.85686604" z3="-3.61860632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.0499771" y3="5.18623627" z3="-4.82884606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.46819324" y3="6.91898109" z3="-3.75971569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46068518" y3="-2.08902836" z3="-0.2901756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45624711" y3="-2.90073489" z3="-1.03597518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99324264" y3="-2.43492399" z3="0.60911082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05648193" y3="-1.26431717" z3="-0.72558817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15352264" y3="-1.38197408" z3="-1.17934059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27598964" y3="-0.34592075" z3="-1.5463293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07673125" y3="-1.52354472" z3="-0.98642578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41567637" y3="-2.04946263" z3="-2.01469089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3307,.005,-.186;7.3674,.1828,.44;6.6237,.4456,-.3187;4.6897,1.2145,-2.2328;4.3716,.3774,-1.1763;2.7058,.7983,-3.6493;3.5816,1.7136,-3.0959;1.3103,2.5273,-4.5614;1.5289,1.1861,-4.3559;.4245,2.8516,-5.1163;2.9395,-.5312,-3.4573;3.0931,-.0519,-1.0066;2.4137,-1.1819,-2.0341;.94,-1.0642,-1.8677;3.1215,-2.5046,-1.8975;-.1436,-3.5877,.6589;-.073,-5.3354,-4.7276;-.2912,-5.0527,-3.6942;-.8628,-4.2959,-1.0861;.7461,-4.6563,-2.8523;-1.6078,-5.098,-3.231;-1.8938,-4.7145,-1.9232;.4719,-4.2929,-1.5323;1.7803,-4.6116,-3.2029;-2.4177,-5.4034,-3.898;-2.9291,-4.7211,-1.5767;-1.0382,-3.8203,.2274;-2.1717,-3.5774,.8743;-3.0696,-4.0249,.4461;-2.1618,-3.4308,2.3404;-2.2151,-3.2176,5.1368;-3.3666,-3.5753,3.044;-.9826,-3.1913,3.062;-1.0066,-3.085,4.4496;-3.3927,-3.4702,4.4318;-4.2907,-3.7788,2.4968;-.0163,-3.1144,2.5592;-.0694,-2.9201,4.9883;-4.3388,-3.592,4.9668;-2.2339,-3.1421,6.2276;1.4078,-3.9396,-.6386;2.1742,-3.4636,-1.1027;.5154,.1643,-4.7254;-3.0484,-1.6397,.0068;-2.8439,-.8712,1.1523;-1.7674,-.2323,1.4594;-.2583,.5767,1.1582;-.2891,1.4473,-.4848;1.0369,-.7301,1.3784;-.2067,1.7975,2.5784;-3.8075,-.826,2.0612;-3.5503,-.1973,3.3063;-.1021,.7328,-1.301;.5368,2.1832,-.5005;-1.236,1.9965,-.6465;1.0205,-1.0955,2.4188;2.0344,-.3064,1.1694;.8996,-1.5664,.6737;-.2888,1.2823,3.5516;.7507,2.3479,2.5695;-1.0195,2.5405,2.5086;-2.695,-.6673,3.8175;-4.4629,-.3379,3.9005;-3.3526,.8779,3.1654;4.849,-.7804,.985;4.4112,-2.1011,.822;3.7643,-2.7643,1.8574;3.5752,-2.0957,3.0635;4.0717,-.8144,3.2837;4.7158,-.1632,2.2363;4.5005,-2.5792,-.1555;3.3561,-3.7657,1.7151;2.7168,-2.7072,4.0833;3.9065,-.3253,4.2444;5.0685,.8631,2.3711;-.8139,.3616,-4.3275;-1.7772,-.6155,-4.5383;-1.4007,-1.7959,-5.1665;-.1004,-2.0055,-5.618;.8552,-1.0239,-5.3875;-1.0832,1.2751,-3.7899;-2.8025,-.4829,-4.1994;-2.3972,-2.8548,-5.3394;.1526,-2.9381,-6.1212;1.8859,-1.1932,-5.7034;2.4325,-2.0415,5.0596;2.2979,-3.8275,3.8786;-2.1335,-3.7628,-6.0988;-3.4279,-2.7706,-4.7019;7.0291,1.2088,-1.4471;6.0612,1.5857,-2.4233;8.3852,1.5974,-1.6241;8.7767,2.311,-2.7304;9.117,1.3088,-.8632;9.8235,2.6014,-2.8576;6.5032,2.3044,-3.5687;7.8231,2.6574,-3.7176;5.7772,2.5689,-4.3411;8.1405,3.2054,-4.6092;3.307,3.1136,-3.2537;2.182,3.5132,-4.0336;4.0755,4.1326,-2.622;3.7764,5.464,-2.8004;4.9102,3.852,-1.9778;4.3811,6.227,-2.2993;1.9093,4.8974,-4.2155;2.6907,5.8569,-3.6186;1.05,5.1862,-4.8288;2.4682,6.919,-3.7597;-4.4607,-2.089,-.2902;-4.4562,-2.9007,-1.036;-4.9932,-2.4349,.6091;-5.0565,-1.2643,-.7256;-2.1535,-1.382,-1.1793;-2.276,-.3459,-1.5463;-1.0767,-1.5235,-.9864;-2.4157,-2.0495,-2.0147;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650206487997</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004459064032 0.000604345933 0.019751196233 0.005338426715</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030405475 -0.002380362 0.000132766 0.000232280 0.000269276 0.000363072 0.000367380 0.000423583 0.000583425 0.000699636 0.000879265 0.000978679 0.001065384 0.001082394 0.001241366 0.001281225 0.001505100 0.001627772 0.001712065 0.001758728 0.001871081 0.002150339 0.002292105 0.002498589 0.002611797 0.002940713 0.003011300 0.003279068 0.003550135 0.003684878 0.004053416 0.004368224 0.004677442 0.004775771 0.005558691 0.005735260 0.005787318 0.006021236 0.006588637 0.006912162 0.007528684 0.007881073 0.008486260 0.009000494 0.009218247 0.009580679 0.010093770 0.010976612 0.011200814 0.011767870 0.012361868 0.012797378 0.013373618 0.013530375 0.014435149 0.014911757 0.015171260 0.015436713 0.015734857 0.016197880 0.016748649 0.017220282 0.018231396 0.018585985 0.019139209 0.020028036 0.021010146 0.021044115 0.022000614 0.022638457 0.022878466 0.024633461 0.025267400 0.026049497 0.026540173 0.027878298 0.028902932 0.029682164 0.031425340 0.031576924 0.032915781 0.033639703 0.034784178 0.035703200 0.037753839 0.038530612 0.039648883 0.040231818 0.041063230 0.043891977 0.044562838 0.044836138 0.046604509 0.048930031 0.049375088 0.050133614 0.050708980 0.051103816 0.052344659 0.052366404 0.052654496 0.052767892 0.054039311 0.054257356 0.055182194 0.055334033 0.056342717 0.056389916 0.056765580 0.057698062 0.059087451 0.059934088 0.060833079 0.061218044 0.062384611 0.063001621 0.063394996 0.064685172 0.064972923 0.066027000 0.066987146 0.068159441 0.070305080 0.072188445 0.073905096 0.075092167 0.077121806 0.082780165 0.084396386 0.085795972 0.086580295 0.087192458 0.089139804 0.090064436 0.092222509 0.094212531 0.094545664 0.095945402 0.096498406 0.097461443 0.098194783 0.099323839 0.099979780 0.101242971 0.101581458 0.102456020 0.102691776 0.103197901 0.103852338 0.105282164 0.106447654 0.106763258 0.108709054 0.109068525 0.109825232 0.111728296 0.112325525 0.114187940 0.115925855 0.117512702 0.119662002 0.120168083 0.121370206 0.122893990 0.124931733 0.125988347 0.126646204 0.131114523 0.134470350 0.135329612 0.142176492 0.142966902 0.145981758 0.146717940 0.149069695 0.150776205 0.152854524 0.153627259 0.156268830 0.159719487 0.160893248 0.172786900 0.173329511 0.177852457 0.183579935 0.184270015 0.188683642 0.189594485 0.192804966 0.193529368 0.197591300 0.199373819 0.203901986 0.206486880 0.206766993 0.209637923 0.210464704 0.213902006 0.215340354 0.216964705 0.218965638 0.224530319 0.225848590 0.231443199 0.234461357 0.234838036 0.235306674 0.243992283 0.255055143 0.256755751 0.261613973 0.266956667 0.278489541 0.282733806 0.286097570 0.289494352 0.293726897 0.300770736 0.305136160 0.305343653 0.306933016 0.314217129 0.314867205 0.321792165 0.327090853 0.329762181 0.348978703 0.349485748 0.351669529 0.354878215 0.356777518 0.361630060 0.362059486 0.378609880 0.383228055 0.389982539 0.409659664 0.423484271 0.428360510 0.450558875 0.466732044 0.469128501 0.475640410 0.481308124 0.481683202 0.489138742 0.504533927 0.511350224 0.533739418 0.565440751 0.571387718 0.589089473 0.592364996 0.602015976 0.605185139 0.639358969 0.644184033 0.645777697 0.672814637 0.674596307 0.684226962 0.691249948 0.691486606 0.698797447 0.703911612 0.715058453 0.740453255 0.743699750 0.751429869 0.760509632 0.771890096 0.778234878 0.809112844 0.810045275 0.813027715 0.820229682 0.820935364 0.824313833 0.830051421 0.832239152 0.833607564 0.842352882 0.845054050 0.846369206 0.857653997 0.864007306 0.864687224 0.871855272 0.877426968 0.883457010 0.888868646 0.891680707 0.893137637 0.899645377 0.919077695 0.922486572 0.931172608 0.933652610 0.964194921 0.975450192 0.984479790 0.999841844 1.012226932 1.025108885 1.040295160 1.048479974 1.055621246 1.063720542 1.085688987 1.087241401 1.101636687 1.105268157 1.111977973 1.113659505 1.123127291 1.135022127 1.139465737 1.170594472 1.172578083 1.176269680 1.181436464 1.187199954 1.194108455 1.216262166 1.221963869 1.265992959 1.297462321 1.314579964 1.326898558 1.329714959 1.331764016 1.332941467 1.334901266 1.341741898 1.344638085 1.357889309 1.374982668 1.381039349 1.382238678 1.390024908 1.418941073 1.421441653 1.551111598 1.660088973 1.772492625</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">104</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3305445" y3="0.00796247" z3="-0.18561275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36783271" y3="0.18195318" z3="0.43933636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62450111" y3="0.44577848" z3="-0.3192381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69165295" y3="1.21696857" z3="-2.23343878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3721067" y3="0.38089559" z3="-1.17610066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70734392" y3="0.80102806" z3="-3.65052544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.5836211" y3="1.71696914" z3="-3.0964192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.31449736" y3="2.5304936" z3="-4.56555781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53085017" y3="1.18902966" z3="-4.35846902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.42887479" y3="2.85511371" z3="-5.12061814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93904644" y3="-0.52836878" z3="-3.45688824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09279905" y3="-0.04667767" z3="-1.00618441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41333589" y3="-1.17753485" z3="-2.03279132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93964803" y3="-1.05999894" z3="-1.86633418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12113394" y3="-2.50023868" z3="-1.89525405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14254523" y3="-3.58874411" z3="0.65859791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.06884652" y3="-5.32974287" z3="-4.729666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.28735044" y3="-5.04932571" z3="-3.69587688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8598305" y3="-4.29765024" z3="-1.08678453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.74895558" y3="-4.6520036" z3="-2.85338996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.60346911" y3="-5.09806483" z3="-3.23283436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.89042317" y3="-4.71647279" z3="-1.92462536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47517361" y3="-4.29252696" z3="-1.5325677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78210531" y3="-4.60305258" z3="-3.20352162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.41134207" y3="-5.40459373" z3="-3.90036285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.92771416" y3="-4.72064577" z3="-1.5779729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03655707" y3="-3.82266522" z3="0.22688657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17054978" y3="-3.58200794" z3="0.87363034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06784389" y3="-4.03121196" z3="0.44567944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16089309" y3="-3.43621356" z3="2.33999828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21411411" y3="-3.22561351" z3="5.13667428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36554868" y3="-3.5841012" z3="3.04364412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98254762" y3="-3.19357192" z3="3.06164705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0065965" y3="-3.08840078" z3="4.44941411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3915558" y3="-3.48024084" z3="4.4315625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2901881" y3="-3.78833708" z3="2.49623966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0159371" y3="-3.11399472" z3="2.55885046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06894994" y3="-2.92222174" z3="4.98824201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33705118" y3="-3.60532732" z3="4.96642814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23290442" y3="-3.15090611" z3="6.22754395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41017547" y3="-3.93897512" z3="-0.63815784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17478445" y3="-3.45996729" z3="-1.10141438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51430734" y3="0.17054124" z3="-4.72277083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.04993031" y3="-1.64665049" z3="0.00674519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.84717961" y3="-0.87788748" z3="1.15271408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.77315593" y3="-0.23689167" z3="1.46042437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.26455071" y3="0.57682971" z3="1.15965108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.29865336" y3="1.44931206" z3="-0.48245253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.03420567" y3="-0.72770459" z3="1.37948483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.21757964" y3="1.79667031" z3="2.58009496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.81135143" y3="-0.83394555" z3="2.06153217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.55371916" y3="-0.20673154" z3="3.30827732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.11290494" y3="0.72906212" z3="-1.30024187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.52316266" y3="2.18946079" z3="-0.50040659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.24841066" y3="1.9845206" z3="-0.64251054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01907084" y3="-1.09258794" z3="2.42009602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.02872432" y3="-0.3008961" z3="1.16894163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89730016" y3="-1.56408318" z3="0.67468883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.30088559" y3="1.28099123" z3="3.55329826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.74241797" y3="2.34624349" z3="2.57170797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.03011516" y3="2.54295403" z3="2.5089579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.69777959" y3="-0.67823804" z3="3.81830733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.46667227" y3="-0.34844003" z3="3.90222602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.35654636" y3="0.86928146" z3="3.17027444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84751932" y3="-0.77538879" z3="0.98621553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41056751" y3="-2.09655597" z3="0.82531922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76387621" y3="-2.75847261" z3="1.86160092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57356825" y3="-2.08778441" z3="3.06626141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06830703" y3="-0.80545613" z3="3.28415068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71242766" y3="-0.15577192" z3="2.23593572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50128144" y3="-2.57644214" z3="-0.15086723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3569234" y3="-3.76067261" z3="1.72098603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71572291" y3="-2.69862629" z3="4.08689244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90176518" y3="-0.31459108" z3="4.24353837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06420486" y3="0.87105129" z3="2.36889514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81341904" y3="0.37096923" z3="-4.32211486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77796815" y3="-0.60609326" z3="-4.53189738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.40324159" y3="-1.78799084" z3="-5.16128734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.10459667" y3="-2.00005513" z3="-5.61190054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.85197256" y3="-1.0184378" z3="-5.38377039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07980641" y3="1.2851923" z3="-3.78651741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80851687" y3="-0.47886222" z3="-4.19106119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.40162398" y3="-2.84654724" z3="-5.33166781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.14764561" y3="-2.93341776" z3="-6.11701589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.88257994" y3="-1.18779696" z3="-5.70191172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.43076741" y3="-2.03154038" z3="5.06250982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.29798984" y3="-3.82009036" z3="3.88357637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.141601" y3="-3.75387456" z3="-6.09265825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43010951" y3="-2.76303509" z3="-4.69017314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03132418" y3="1.20680149" z3="-1.44899844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06413876" y3="1.5852511" z3="-2.42520068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.38846261" y3="1.58954372" z3="-1.62794476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.78142888" y3="2.29781692" z3="-2.73654883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1194523" y3="1.29888471" z3="-0.86718601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.82886018" y3="2.58175908" z3="-2.86582803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50773367" y3="2.30068425" z3="-3.57224311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.82853228" y3="2.64675353" z3="-3.72340924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.78238883" y3="2.56639986" z3="-4.34476433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.14720005" y3="3.1906626" z3="-4.61681484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.30904725" y3="3.11912071" z3="-3.25250093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.18606697" y3="3.51854588" z3="-4.03488844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.08000006" y3="4.1370084" z3="-2.62269502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.78851661" y3="5.46553379" z3="-2.80873396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.91473683" y3="3.85539506" z3="-1.97896099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.39917855" y3="6.2246017" z3="-2.31512219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.91788574" y3="4.90229357" z3="-4.22005835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.70429929" y3="5.85844516" z3="-3.62873855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.06147187" y3="5.18979637" z3="-4.83758666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.48794444" y3="6.91856149" z3="-3.77631964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46198365" y3="-2.09781949" z3="-0.29030941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45906524" y3="-2.91041821" z3="-1.03797923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99374902" y3="-2.44485124" z3="0.61050718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.05942703" y3="-1.27313064" z3="-0.72368418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15566944" y3="-1.38562282" z3="-1.17873718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27967733" y3="-0.34875529" z3="-1.54385273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.07948508" y3="-1.52513555" z3="-0.98436742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41516395" y3="-2.05177339" z3="-2.01492052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3305,.008,-.1856;7.3678,.182,.4393;6.6245,.4458,-.3192;4.6917,1.217,-2.2334;4.3721,.3809,-1.1761;2.7073,.801,-3.6505;3.5836,1.717,-3.0964;1.3145,2.5305,-4.5656;1.5309,1.189,-4.3585;.4289,2.8551,-5.1206;2.939,-.5284,-3.4569;3.0928,-.0467,-1.0062;2.4133,-1.1775,-2.0328;.9396,-1.06,-1.8663;3.1211,-2.5002,-1.8953;-.1425,-3.5887,.6586;-.0688,-5.3297,-4.7297;-.2874,-5.0493,-3.6959;-.8598,-4.2977,-1.0868;.749,-4.652,-2.8534;-1.6035,-5.0981,-3.2328;-1.8904,-4.7165,-1.9246;.4752,-4.2925,-1.5326;1.7821,-4.6031,-3.2035;-2.4113,-5.4046,-3.9004;-2.9277,-4.7206,-1.578;-1.0366,-3.8227,.2269;-2.1705,-3.582,.8736;-3.0678,-4.0312,.4457;-2.1609,-3.4362,2.34;-2.2141,-3.2256,5.1367;-3.3655,-3.5841,3.0436;-.9825,-3.1936,3.0616;-1.0066,-3.0884,4.4494;-3.3916,-3.4802,4.4316;-4.2902,-3.7883,2.4962;-.0159,-3.114,2.5589;-.0689,-2.9222,4.9882;-4.3371,-3.6053,4.9664;-2.2329,-3.1509,6.2275;1.4102,-3.939,-.6382;2.1748,-3.46,-1.1014;.5143,.1705,-4.7228;-3.0499,-1.6467,.0067;-2.8472,-.8779,1.1527;-1.7732,-.2369,1.4604;-.2646,.5768,1.1597;-.2987,1.4493,-.4825;1.0342,-.7277,1.3795;-.2176,1.7967,2.5801;-3.8114,-.8339,2.0615;-3.5537,-.2067,3.3083;-.1129,.7291,-1.3002;.5232,2.1895,-.5004;-1.2484,1.9845,-.6425;1.0191,-1.0926,2.4201;2.0287,-.3009,1.1689;.8973,-1.5641,.6747;-.3009,1.281,3.5533;.7424,2.3462,2.5717;-1.0301,2.543,2.509;-2.6978,-.6782,3.8183;-4.4667,-.3484,3.9022;-3.3565,.8693,3.1703;4.8475,-.7754,.9862;4.4106,-2.0966,.8253;3.7639,-2.7585,1.8616;3.5736,-2.0878,3.0663;4.0683,-.8055,3.2842;4.7124,-.1558,2.2359;4.5013,-2.5764,-.1509;3.3569,-3.7607,1.721;2.7157,-2.6986,4.0869;3.9018,-.3146,4.2435;5.0642,.8711,2.3689;-.8134,.371,-4.3221;-1.778,-.6061,-4.5319;-1.4032,-1.788,-5.1613;-.1046,-2.0001,-5.6119;.852,-1.0184,-5.3838;-1.0798,1.2852,-3.7865;-2.8085,-.4789,-4.1911;-2.4016,-2.8465,-5.3317;.1476,-2.9334,-6.117;1.8826,-1.1878,-5.7019;2.4308,-2.0315,5.0625;2.298,-3.8201,3.8836;-2.1416,-3.7539,-6.0927;-3.4301,-2.763,-4.6902;7.0313,1.2068,-1.449;6.0641,1.5853,-2.4252;8.3885,1.5895,-1.6279;8.7814,2.2978,-2.7365;9.1195,1.2989,-.8672;9.8289,2.5818,-2.8658;6.5077,2.3007,-3.5722;7.8285,2.6468,-3.7234;5.7824,2.5664,-4.3448;8.1472,3.1907,-4.6168;3.309,3.1191,-3.2525;2.1861,3.5185,-4.0349;4.08,4.137,-2.6227;3.7885,5.4655,-2.8087;4.9147,3.8554,-1.979;4.3992,6.2246,-2.3151;1.9179,4.9023,-4.2201;2.7043,5.8584,-3.6287;1.0615,5.1898,-4.8376;2.4879,6.9186,-3.7763;-4.462,-2.0978,-.2903;-4.4591,-2.9104,-1.038;-4.9937,-2.4449,.6105;-5.0594,-1.2731,-.7237;-2.1557,-1.3856,-1.1787;-2.2797,-.3488,-1.5439;-1.0795,-1.5251,-.9844;-2.4152,-2.0518,-2.0149;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650222237855</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005016739736 0.000649878062 0.017160314215 0.005337937371</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030415191 -0.002694448 0.000130929 0.000231553 0.000269240 0.000363200 0.000367449 0.000423471 0.000586415 0.000699707 0.000881918 0.000981689 0.001065517 0.001105233 0.001255043 0.001290972 0.001505107 0.001631925 0.001712463 0.001759911 0.001880420 0.002157534 0.002294822 0.002509920 0.002616510 0.002967370 0.003022983 0.003279056 0.003550236 0.003687512 0.004058485 0.004379507 0.004682689 0.004775877 0.005567173 0.005783679 0.005837873 0.006123951 0.006608568 0.006945430 0.007528557 0.007889058 0.008486928 0.009003183 0.009224518 0.009640141 0.010098105 0.010979757 0.011206284 0.011769440 0.012427469 0.012815744 0.013377803 0.013539704 0.014485543 0.014962545 0.015236617 0.015448935 0.015766700 0.016236844 0.016750889 0.017225794 0.018238816 0.018586917 0.019142989 0.020045154 0.021010138 0.021070618 0.022004822 0.022635530 0.022878592 0.024661250 0.025387482 0.026120808 0.026541193 0.027881883 0.028913958 0.029702315 0.031478572 0.031630486 0.032994061 0.033641469 0.034901605 0.035709746 0.037815207 0.038533207 0.039650689 0.040232789 0.041063502 0.043916514 0.044572189 0.044846928 0.046669240 0.048996188 0.049504570 0.050133006 0.050709497 0.051114612 0.052349661 0.052376408 0.052663534 0.052780978 0.054059800 0.054265726 0.055185862 0.055349566 0.056352308 0.056390229 0.056829588 0.057759724 0.059215806 0.060008890 0.060849484 0.061218275 0.062432592 0.063002339 0.063417716 0.064685403 0.064975286 0.066028677 0.067113438 0.068219234 0.070622208 0.072196844 0.073905204 0.075177744 0.077123149 0.082788410 0.084396436 0.085796620 0.086597064 0.087212203 0.089308602 0.090068463 0.092327588 0.094217760 0.094548480 0.095968760 0.096498516 0.097475307 0.098197119 0.099325377 0.099982084 0.101254482 0.101621309 0.102491376 0.102704649 0.103228708 0.103855382 0.105280589 0.106451921 0.106784022 0.108716130 0.109148009 0.109852066 0.111731193 0.112364600 0.114188129 0.115930571 0.117675628 0.119868921 0.120298124 0.121411225 0.123079206 0.124953909 0.125989392 0.126648619 0.131150797 0.134471737 0.135330148 0.142195363 0.142983829 0.146057650 0.146725067 0.149109366 0.150780476 0.152919676 0.153704712 0.156288886 0.159804820 0.160896391 0.172792867 0.173349250 0.177855989 0.183607632 0.184314496 0.188684745 0.189680746 0.192841139 0.193537572 0.197615666 0.199383735 0.203975147 0.206487121 0.206767647 0.209638831 0.210470596 0.213927883 0.215447822 0.216981397 0.218984059 0.224530769 0.225857572 0.231445980 0.234463521 0.234839749 0.235310718 0.243999617 0.255075917 0.256768838 0.261613871 0.267003125 0.278492766 0.282733844 0.286098671 0.289601607 0.293806087 0.300960995 0.305145708 0.305344214 0.306940285 0.314287746 0.314875051 0.321796906 0.327136457 0.329773521 0.349062088 0.349518341 0.351920998 0.354921189 0.356862731 0.361637576 0.362118436 0.378663907 0.383234027 0.390097673 0.409760690 0.423733623 0.428449763 0.450574007 0.466744668 0.469176666 0.475641422 0.481506115 0.481862331 0.489209767 0.504575631 0.511615570 0.533761075 0.565442750 0.571440516 0.589183630 0.592424236 0.602024033 0.605185173 0.639416262 0.644204597 0.645796298 0.673192331 0.674609491 0.684231014 0.691250831 0.691492577 0.698820411 0.703911860 0.715116905 0.740459539 0.744702081 0.751505273 0.760510295 0.771906267 0.778241609 0.809125150 0.810047734 0.813027917 0.820438985 0.820982225 0.824535437 0.830053908 0.832254812 0.833672843 0.842443596 0.845057437 0.846381136 0.857654109 0.864018908 0.864687281 0.872006280 0.877934092 0.883457774 0.888871689 0.891685386 0.895022196 0.899854815 0.919084612 0.922491180 0.931197882 0.933926203 0.964196961 0.975454075 0.984483805 0.999848482 1.012226956 1.025173564 1.040303952 1.048494552 1.055629599 1.063729041 1.085689801 1.087262428 1.101931080 1.105287461 1.111979781 1.113799864 1.123130764 1.135022510 1.139465654 1.170600041 1.172641507 1.176296328 1.181733061 1.187204786 1.194117011 1.216405639 1.222034799 1.266070113 1.297468627 1.314628838 1.326902928 1.329733053 1.331823557 1.333125272 1.334901427 1.341770630 1.344649510 1.357916800 1.374982758 1.381062543 1.382335680 1.390051189 1.418941500 1.421455129 1.551118957 1.660091062 1.772519070</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">105</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33026829" y3="0.01086526" z3="-0.18530711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36813592" y3="0.1796078" z3="0.43840112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62521304" y3="0.44364187" z3="-0.32056824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69382315" y3="1.21630349" z3="-2.2355231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37250128" y3="0.38438555" z3="-1.17616367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70802154" y3="0.80441534" z3="-3.64992363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58771865" y3="1.71747393" z3="-3.09984948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3193448" y3="2.53586161" z3="-4.56727887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5327053" y3="1.19442269" z3="-4.35765412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.43491279" y3="2.86078437" z3="-5.12398876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93678389" y3="-0.52525359" z3="-3.45503927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09245236" y3="-0.04014582" z3="-1.00561176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41271073" y3="-1.17281089" z3="-2.02992522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93904748" y3="-1.05607415" z3="-1.86282487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12180525" y3="-2.49481304" z3="-1.89167514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14119983" y3="-3.58928785" z3="0.65838221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.06376912" y3="-5.32586008" z3="-4.73105675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.28317534" y3="-5.04622563" z3="-3.69712908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85772103" y3="-4.29740035" z3="-1.08774825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.752665" y3="-4.64862188" z3="-2.8539882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.59979744" y3="-5.096247" z3="-3.23468524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.88782423" y3="-4.71579203" z3="-1.92634317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.47726759" y3="-4.28985518" z3="-1.53304506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78689401" y3="-4.60033218" z3="-3.20448997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.40749447" y3="-5.40331429" z3="-3.90263067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.92372664" y3="-4.72399446" z3="-1.58069815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03488436" y3="-3.82445857" z3="0.22653388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16901822" y3="-3.58710699" z3="0.87366586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06567715" y3="-4.03677406" z3="0.44473902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16006276" y3="-3.44142028" z3="2.33971547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21404319" y3="-3.23325359" z3="5.13637986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36401905" y3="-3.59397326" z3="3.04316886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98268637" y3="-3.1948418" z3="3.06140599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00702703" y3="-3.09109581" z3="4.44924147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39024543" y3="-3.49161637" z3="4.43113946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28681233" y3="-3.80211886" z3="2.49568266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01696912" y3="-3.11047677" z3="2.55844707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07074189" y3="-2.92115463" z3="4.98819219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33501379" y3="-3.62083221" z3="4.96595987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23273987" y3="-3.16004915" z3="6.22735637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4106008" y3="-3.93537084" z3="-0.63797319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17773102" y3="-3.45681612" z3="-1.1010248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51499511" y3="0.17463031" z3="-4.72344336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05310848" y3="-1.65058976" z3="0.00724973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8516244" y3="-0.88398242" z3="1.15435471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.77933735" y3="-0.24128983" z3="1.4639773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.2723273" y3="0.57456807" z3="1.16146229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.30921546" y3="1.44543612" z3="-0.48125445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.03067478" y3="-0.72546492" z3="1.38045523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.22683019" y3="1.79607645" z3="2.58179616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8153149" y3="-0.8441576" z3="2.06345181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.55940275" y3="-0.21761196" z3="3.31021701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.11629888" y3="0.73185654" z3="-1.29795786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.50919116" y3="2.18925335" z3="-0.49609729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.26149955" y3="1.98705049" z3="-0.64315828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01897177" y3="-1.08844613" z3="2.42140682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0226248" y3="-0.2946022" z3="1.16797492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89771978" y3="-1.56287322" z3="0.67702625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.30873682" y3="1.28003985" z3="3.55470978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.72888708" y3="2.34969805" z3="2.57467638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.04220302" y3="2.5365899" z3="2.51081647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.70218395" y3="-0.6851865" z3="3.82002505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.47099977" y3="-0.36341968" z3="3.90447093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.36630159" y3="0.858612" z3="3.17261247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84607542" y3="-0.77009842" z3="0.98764943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4099767" y3="-2.09181126" z3="0.82875316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76309174" y3="-2.75246727" z3="1.86570346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57187489" y3="-2.07986502" z3="3.06920712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06546208" y3="-0.79668209" z3="3.28519614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70978147" y3="-0.1483713" z3="2.23625063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50133204" y3="-2.57313613" z3="-0.14682981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35668341" y3="-3.75521907" z3="1.72649815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71469912" y3="-2.68994605" z3="4.09082003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89837762" y3="-0.30429" z3="4.24387433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06096327" y3="0.87888365" z3="2.36765868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81268752" y3="0.37604155" z3="-4.32126234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77929027" y3="-0.5978578" z3="-4.52510789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.40772062" y3="-1.78058291" z3="-5.15310752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1093217" y3="-1.99382853" z3="-5.60781639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.84959777" y3="-1.01553747" z3="-5.38420615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07731161" y3="1.2913571" z3="-3.78480685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8031998" y3="-0.46170191" z3="-4.18403407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.40710301" y3="-2.83775958" z3="-5.32169212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.14018472" y3="-2.92804551" z3="-6.11039305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.87761242" y3="-1.18983757" z3="-5.70121402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.4235797" y3="-2.02003408" z3="5.06148397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3039688" y3="-3.81381837" z3="3.89336741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.15109574" y3="-3.74417755" z3="-6.08531825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43242609" y3="-2.75338171" z3="-4.67589205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03359206" y3="1.20005475" z3="-1.45230158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06684966" y3="1.57921878" z3="-2.42866195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39212683" y3="1.58017487" z3="-1.63248292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.78683514" y3="2.28743391" z3="-2.74217186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.12315292" y3="1.28988845" z3="-0.87143896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.83578568" y3="2.57161215" z3="-2.87193648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51167961" y3="2.29168994" z3="-3.57712556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.83402906" y3="2.63688096" z3="-3.72907757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.78657799" y3="2.55923573" z3="-4.34919478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.15395222" y3="3.18040957" z3="-4.62316573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.31891465" y3="3.11801411" z3="-3.26189767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.19565054" y3="3.51953626" z3="-4.04322987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.09229273" y3="4.13543408" z3="-2.63442054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.79875219" y3="5.46750115" z3="-2.81719788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.92486601" y3="3.85447155" z3="-1.98772992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.40717277" y3="6.22992216" z3="-2.31914707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.92842557" y3="4.90444313" z3="-4.2290656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.71452359" y3="5.8621571" z3="-3.63647049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.07089304" y3="5.19404189" z3="-4.84439615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.49516364" y3="6.92567044" z3="-3.77994102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46411451" y3="-2.1050138" z3="-0.28957912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45899806" y3="-2.91688232" z3="-1.03699462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99495791" y3="-2.45339693" z3="0.6109411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06297825" y3="-1.28159157" z3="-0.72308244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15828816" y3="-1.38798286" z3="-1.17770024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28245735" y3="-0.35093392" z3="-1.54180421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08125475" y3="-1.52796617" z3="-0.98373387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41826268" y3="-2.05375073" z3="-2.01485186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3303,.0109,-.1853;7.3681,.1796,.4384;6.6252,.4436,-.3206;4.6938,1.2163,-2.2355;4.3725,.3844,-1.1762;2.708,.8044,-3.6499;3.5877,1.7175,-3.0998;1.3193,2.5359,-4.5673;1.5327,1.1944,-4.3577;.4349,2.8608,-5.124;2.9368,-.5253,-3.455;3.0925,-.0401,-1.0056;2.4127,-1.1728,-2.0299;.939,-1.0561,-1.8628;3.1218,-2.4948,-1.8917;-.1412,-3.5893,.6584;-.0638,-5.3259,-4.7311;-.2832,-5.0462,-3.6971;-.8577,-4.2974,-1.0877;.7527,-4.6486,-2.854;-1.5998,-5.0962,-3.2347;-1.8878,-4.7158,-1.9263;.4773,-4.2899,-1.533;1.7869,-4.6003,-3.2045;-2.4075,-5.4033,-3.9026;-2.9237,-4.724,-1.5807;-1.0349,-3.8245,.2265;-2.169,-3.5871,.8737;-3.0657,-4.0368,.4447;-2.1601,-3.4414,2.3397;-2.214,-3.2333,5.1364;-3.364,-3.594,3.0432;-.9827,-3.1948,3.0614;-1.007,-3.0911,4.4492;-3.3902,-3.4916,4.4311;-4.2868,-3.8021,2.4957;-.017,-3.1105,2.5584;-.0707,-2.9212,4.9882;-4.335,-3.6208,4.966;-2.2327,-3.16,6.2274;1.4106,-3.9354,-.638;2.1777,-3.4568,-1.101;.515,.1746,-4.7234;-3.0531,-1.6506,.0072;-2.8516,-.884,1.1544;-1.7793,-.2413,1.464;-.2723,.5746,1.1615;-.3092,1.4454,-.4813;1.0307,-.7255,1.3805;-.2268,1.7961,2.5818;-3.8153,-.8442,2.0635;-3.5594,-.2176,3.3102;-.1163,.7319,-1.298;.5092,2.1893,-.4961;-1.2615,1.9871,-.6432;1.019,-1.0884,2.4214;2.0226,-.2946,1.168;.8977,-1.5629,.677;-.3087,1.28,3.5547;.7289,2.3497,2.5747;-1.0422,2.5366,2.5108;-2.7022,-.6852,3.82;-4.471,-.3634,3.9045;-3.3663,.8586,3.1726;4.8461,-.7701,.9876;4.41,-2.0918,.8288;3.7631,-2.7525,1.8657;3.5719,-2.0799,3.0692;4.0655,-.7967,3.2852;4.7098,-.1484,2.2363;4.5013,-2.5731,-.1468;3.3567,-3.7552,1.7265;2.7147,-2.6899,4.0908;3.8984,-.3043,4.2439;5.061,.8789,2.3677;-.8127,.376,-4.3213;-1.7793,-.5979,-4.5251;-1.4077,-1.7806,-5.1531;-.1093,-1.9938,-5.6078;.8496,-1.0155,-5.3842;-1.0773,1.2914,-3.7848;-2.8032,-.4617,-4.184;-2.4071,-2.8378,-5.3217;.1402,-2.928,-6.1104;1.8776,-1.1898,-5.7012;2.4236,-2.02,5.0615;2.304,-3.8138,3.8934;-2.1511,-3.7442,-6.0853;-3.4324,-2.7534,-4.6759;7.0336,1.2001,-1.4523;6.0668,1.5792,-2.4287;8.3921,1.5802,-1.6325;8.7868,2.2874,-2.7422;9.1232,1.2899,-.8714;9.8358,2.5716,-2.8719;6.5117,2.2917,-3.5771;7.834,2.6369,-3.7291;5.7866,2.5592,-4.3492;8.154,3.1804,-4.6232;3.3189,3.118,-3.2619;2.1957,3.5195,-4.0432;4.0923,4.1354,-2.6344;3.7988,5.4675,-2.8172;4.9249,3.8545,-1.9877;4.4072,6.2299,-2.3191;1.9284,4.9044,-4.2291;2.7145,5.8622,-3.6365;1.0709,5.194,-4.8444;2.4952,6.9257,-3.7799;-4.4641,-2.105,-.2896;-4.459,-2.9169,-1.037;-4.995,-2.4534,.6109;-5.063,-1.2816,-.7231;-2.1583,-1.388,-1.1777;-2.2825,-.3509,-1.5418;-1.0813,-1.528,-.9837;-2.4183,-2.0538,-2.0149;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650242307658</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004906230911 0.000693236237 0.019445128688 0.005338149807</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030428477 -0.002721923 0.000129164 0.000231344 0.000271183 0.000363361 0.000367901 0.000423524 0.000586536 0.000700056 0.000881887 0.000987236 0.001069066 0.001108422 0.001266032 0.001290913 0.001507632 0.001641846 0.001714397 0.001761375 0.001880149 0.002170561 0.002298014 0.002514546 0.002617552 0.002970923 0.003037715 0.003279179 0.003551547 0.003690189 0.004061491 0.004378998 0.004683620 0.004776970 0.005567277 0.005784154 0.005860377 0.006222125 0.006627399 0.007015234 0.007531187 0.007891303 0.008488975 0.009017682 0.009231199 0.009762076 0.010098907 0.010996526 0.011211710 0.011771427 0.012498400 0.012816643 0.013377841 0.013543772 0.014513774 0.014996999 0.015280587 0.015458014 0.015768113 0.016234484 0.016752397 0.017233742 0.018253034 0.018587040 0.019156367 0.020054448 0.021010489 0.021074318 0.022005915 0.022698206 0.022881000 0.024666025 0.025472951 0.026181512 0.026556041 0.027931018 0.028912732 0.029714813 0.031510169 0.031670655 0.033053607 0.033641517 0.034972573 0.035716301 0.037910189 0.038533179 0.039689105 0.040233939 0.041069664 0.043962040 0.044574047 0.044862110 0.046706483 0.049043959 0.049689471 0.050141996 0.050712650 0.051118363 0.052350170 0.052388336 0.052666285 0.052780459 0.054063887 0.054288435 0.055194597 0.055365375 0.056356050 0.056395611 0.056849993 0.057787780 0.059326509 0.060167604 0.060911462 0.061218333 0.062466982 0.063002260 0.063419491 0.064686036 0.064978733 0.066029839 0.067171395 0.068283779 0.070877380 0.072195110 0.073905305 0.075327116 0.077125085 0.082809087 0.084399219 0.085800835 0.086648785 0.087225836 0.089566000 0.090069622 0.092464478 0.094236904 0.094553011 0.095985749 0.096498722 0.097484005 0.098197957 0.099325299 0.099982277 0.101274634 0.101658086 0.102568953 0.102794583 0.103291975 0.103855787 0.105296999 0.106454433 0.106796875 0.108717748 0.109249469 0.109882883 0.111747201 0.112390799 0.114192213 0.115932131 0.117872173 0.119949289 0.120444567 0.121468396 0.123181158 0.124977388 0.125990099 0.126652578 0.131179529 0.134475812 0.135331995 0.142200966 0.142987487 0.146188004 0.146732758 0.149128156 0.150782570 0.153074735 0.153761941 0.156293734 0.159883047 0.160913793 0.172816861 0.173363766 0.177864411 0.183616065 0.184331464 0.188692255 0.189691434 0.192858579 0.193540444 0.197627927 0.199413284 0.204028603 0.206491581 0.206768359 0.209639260 0.210470988 0.213981109 0.215540977 0.216980442 0.219012765 0.224537848 0.225857396 0.231447835 0.234470509 0.234841125 0.235311859 0.244001814 0.255104944 0.256773782 0.261614513 0.267002616 0.278499796 0.282734723 0.286099298 0.289618677 0.293917349 0.301322159 0.305172537 0.305345336 0.306958793 0.314358846 0.314935035 0.321797455 0.327232401 0.329828907 0.349120323 0.349523045 0.352195057 0.354930565 0.356874695 0.361643172 0.362132326 0.378706424 0.383332474 0.390141873 0.409794664 0.424065516 0.428475712 0.450578403 0.466744795 0.469223420 0.475643889 0.481535173 0.482350759 0.489222796 0.504637494 0.511821734 0.533760894 0.565459766 0.571536540 0.589423165 0.592467507 0.602092302 0.605186311 0.639419893 0.644323809 0.645796245 0.673426070 0.674722015 0.684231621 0.691258075 0.691638169 0.698828302 0.703912107 0.715164660 0.740459650 0.746303454 0.751615454 0.760548455 0.771933869 0.778241503 0.809126061 0.810048783 0.813029459 0.820469769 0.821023950 0.824755668 0.830099698 0.832295853 0.833671975 0.842462747 0.845058464 0.846390921 0.857654306 0.864020209 0.864688096 0.872121468 0.878271146 0.883466198 0.888878316 0.891686160 0.896922192 0.900106491 0.919088577 0.922491388 0.931200869 0.934218109 0.964209338 0.975458699 0.984496685 0.999855897 1.012237510 1.025271344 1.040327582 1.048540061 1.055639095 1.063735595 1.085691908 1.087262224 1.102096097 1.105298088 1.111979802 1.113927851 1.123132764 1.135023227 1.139473646 1.170601244 1.172776273 1.176299646 1.182190379 1.187313870 1.194133696 1.216555482 1.222034834 1.266532753 1.297544500 1.314707599 1.326917619 1.329783877 1.331975108 1.333140110 1.334909613 1.341838158 1.344672472 1.357919795 1.374982756 1.381114034 1.382579910 1.390058738 1.418945769 1.421542104 1.551122762 1.660094602 1.772526669</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">106</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33073307" y3="0.01272078" z3="-0.18547934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36948858" y3="0.17922789" z3="0.43760746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62689999" y3="0.44444017" z3="-0.32119136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69635791" y3="1.21781072" z3="-2.23695442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37352776" y3="0.3866922" z3="-1.17668191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70984517" y3="0.80581625" z3="-3.65161425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59044486" y3="1.71971269" z3="-3.10143702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.32224028" y3="2.53922851" z3="-4.56876643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53415896" y3="1.19691251" z3="-4.35880226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.43722381" y3="2.86641518" z3="-5.1231567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93710352" y3="-0.52396459" z3="-3.45499811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09263508" y3="-0.0357022" z3="-1.00555266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41258135" y3="-1.16923977" z3="-2.0286739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93894764" y3="-1.05262648" z3="-1.8610438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12204503" y3="-2.49082676" z3="-1.88894589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14038356" y3="-3.58984974" z3="0.65772845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.05801453" y3="-5.32155733" z3="-4.73304089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2783229" y3="-5.04320729" z3="-3.69900892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85524589" y3="-4.29746598" z3="-1.08908009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.75662404" y3="-4.64569576" z3="-2.85474876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.59490329" y3="-5.09550366" z3="-3.23720995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.88357325" y3="-4.7175656" z3="-1.92842659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48005045" y3="-4.28818625" z3="-1.53372625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79034192" y3="-4.59465069" z3="-3.20378732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.40288645" y3="-5.40129786" z3="-3.90599172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9199817" y3="-4.72724947" z3="-1.58287884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03371853" y3="-3.82581556" z3="0.22541202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16876266" y3="-3.59053626" z3="0.87245285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06391228" y3="-4.04300152" z3="0.44386467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15936322" y3="-3.44680954" z3="2.339006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21365746" y3="-3.24063129" z3="5.13588743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36262432" y3="-3.60406716" z3="3.04266934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98242241" y3="-3.19684578" z3="3.06068271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00697368" y3="-3.09414004" z3="4.44861687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38926163" y3="-3.50239478" z3="4.43069498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28552385" y3="-3.81426623" z3="2.49508839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01703176" y3="-3.10829376" z3="2.55747057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07094014" y3="-2.92141528" z3="4.98758636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33406143" y3="-3.63431635" z3="4.9656373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23283595" y3="-3.16785866" z3="6.22685194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41341854" y3="-3.93437829" z3="-0.6376927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17763293" y3="-3.45248271" z3="-1.09907508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51378141" y3="0.18059952" z3="-4.7193867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05557401" y3="-1.65734366" z3="0.00834803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.85468926" y3="-0.89109577" z3="1.15620523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.78008419" y3="-0.24940227" z3="1.46481509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.27983415" y3="0.57583503" z3="1.16360215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.31906251" y3="1.44854317" z3="-0.47861494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.02767918" y3="-0.71976678" z3="1.3820472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.24017696" y3="1.7955001" z3="2.58431028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.81863772" y3="-0.85228938" z3="2.06527401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.56413154" y3="-0.2269714" z3="3.31294573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.12453279" y3="0.73079174" z3="-1.29533838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.49783743" y3="2.19528633" z3="-0.4945496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.27277835" y3="1.97656726" z3="-0.64112034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01700317" y3="-1.08419175" z3="2.42311442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.02173771" y3="-0.28927811" z3="1.16914378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89355438" y3="-1.55844286" z3="0.67898017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.32071987" y3="1.27961947" z3="3.5574249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.71644329" y3="2.3504921" z3="2.57626673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.05675834" y3="2.53655522" z3="2.51301121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7051908" y3="-0.69406597" z3="3.82139074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.47537594" y3="-0.37571103" z3="3.90749611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.37357033" y3="0.85012975" z3="3.17647187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84519458" y3="-0.7657943" z3="0.98859982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40910253" y3="-2.08771547" z3="0.83190175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76226507" y3="-2.74661684" z3="1.86998972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57044628" y3="-2.07191553" z3="3.07215362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06334609" y3="-0.78813376" z3="3.28573623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.7080709" y3="-0.14165705" z3="2.23590651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50090801" y3="-2.57062834" z3="-0.14279918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35671921" y3="-3.74978233" z3="1.73283601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71340014" y3="-2.68082638" z3="4.09461032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89549979" y3="-0.29395822" z3="4.24317644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05902767" y3="0.88588274" z3="2.36567317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81193073" y3="0.38571904" z3="-4.31595985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77970994" y3="-0.58979747" z3="-4.52175159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41033876" y3="-1.77363605" z3="-5.14858486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.11417048" y3="-1.99042798" z3="-5.60453234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.84599449" y3="-1.01057431" z3="-5.37957345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07451052" y3="1.30177939" z3="-3.78159314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80788405" y3="-0.45807247" z3="-4.1771655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.41161071" y3="-2.8291011" z3="-5.31216122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.13350958" y3="-2.92518826" z3="-6.10821338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.87621701" y3="-1.18225371" z3="-5.70140135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.42338584" y3="-2.00904615" z3="5.06611145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30124968" y3="-3.80592391" z3="3.89654262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.15926214" y3="-3.73484436" z3="-6.07801861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43465033" y3="-2.74564045" z3="-4.66189682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03684068" y3="1.19956508" z3="-1.45397935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07062974" y3="1.57910354" z3="-2.4307486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39598213" y3="1.5739009" z3="-1.63607683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.79172845" y3="2.27509997" z3="-2.74814399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.12644256" y3="1.28221987" z3="-0.87514552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.84064046" y3="2.55216702" z3="-2.88002208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51674632" y3="2.2869211" z3="-3.58119901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.83931439" y3="2.62449484" z3="-3.73546709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79150118" y3="2.55247385" z3="-4.35405156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.15998006" y3="3.16209771" z3="-4.6316109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.32208532" y3="3.1222075" z3="-3.26263525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.19880725" y3="3.52491182" z3="-4.04328172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.09824" y3="4.13894338" z3="-2.63760397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.81062552" y3="5.4688043" z3="-2.82596837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.93362114" y3="3.85499923" z3="-1.99541526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.42365614" y3="6.22790551" z3="-2.33375076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.935614" y3="4.90930562" z3="-4.23237591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.72609144" y3="5.86450968" z3="-3.64453272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.07867071" y3="5.19948358" z3="-4.84820936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.51386723" y3="6.92510205" z3="-3.79482474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46531026" y3="-2.1131166" z3="-0.29034215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45664819" y3="-2.92136606" z3="-1.04024007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99541206" y3="-2.46644764" z3="0.60763979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.06630459" y3="-1.28990457" z3="-0.72148964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16164207" y3="-1.39109913" z3="-1.17655224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28846498" y3="-0.35407488" z3="-1.53883678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08484698" y3="-1.52845129" z3="-0.98297143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42088125" y3="-2.05543155" z3="-2.01491994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3307,.0127,-.1855;7.3695,.1792,.4376;6.6269,.4444,-.3212;4.6964,1.2178,-2.237;4.3735,.3867,-1.1767;2.7098,.8058,-3.6516;3.5904,1.7197,-3.1014;1.3222,2.5392,-4.5688;1.5342,1.1969,-4.3588;.4372,2.8664,-5.1232;2.9371,-.524,-3.455;3.0926,-.0357,-1.0056;2.4126,-1.1692,-2.0287;.9389,-1.0526,-1.861;3.122,-2.4908,-1.8889;-.1404,-3.5898,.6577;-.058,-5.3216,-4.733;-.2783,-5.0432,-3.699;-.8552,-4.2975,-1.0891;.7566,-4.6457,-2.8547;-1.5949,-5.0955,-3.2372;-1.8836,-4.7176,-1.9284;.4801,-4.2882,-1.5337;1.7903,-4.5947,-3.2038;-2.4029,-5.4013,-3.906;-2.92,-4.7272,-1.5829;-1.0337,-3.8258,.2254;-2.1688,-3.5905,.8725;-3.0639,-4.043,.4439;-2.1594,-3.4468,2.339;-2.2137,-3.2406,5.1359;-3.3626,-3.6041,3.0427;-.9824,-3.1968,3.0607;-1.007,-3.0941,4.4486;-3.3893,-3.5024,4.4307;-4.2855,-3.8143,2.4951;-.017,-3.1083,2.5575;-.0709,-2.9214,4.9876;-4.3341,-3.6343,4.9656;-2.2328,-3.1679,6.2269;1.4134,-3.9344,-.6377;2.1776,-3.4525,-1.0991;.5138,.1806,-4.7194;-3.0556,-1.6573,.0083;-2.8547,-.8911,1.1562;-1.7801,-.2494,1.4648;-.2798,.5758,1.1636;-.3191,1.4485,-.4786;1.0277,-.7198,1.382;-.2402,1.7955,2.5843;-3.8186,-.8523,2.0653;-3.5641,-.227,3.3129;-.1245,.7308,-1.2953;.4978,2.1953,-.4945;-1.2728,1.9766,-.6411;1.017,-1.0842,2.4231;2.0217,-.2893,1.1691;.8936,-1.5584,.679;-.3207,1.2796,3.5574;.7164,2.3505,2.5763;-1.0568,2.5366,2.513;-2.7052,-.6941,3.8214;-4.4754,-.3757,3.9075;-3.3736,.8501,3.1765;4.8452,-.7658,.9886;4.4091,-2.0877,.8319;3.7623,-2.7466,1.87;3.5704,-2.0719,3.0722;4.0633,-.7881,3.2857;4.7081,-.1417,2.2359;4.5009,-2.5706,-.1428;3.3567,-3.7498,1.7328;2.7134,-2.6808,4.0946;3.8955,-.294,4.2432;5.059,.8859,2.3657;-.8119,.3857,-4.316;-1.7797,-.5898,-4.5218;-1.4103,-1.7736,-5.1486;-.1142,-1.9904,-5.6045;.846,-1.0106,-5.3796;-1.0745,1.3018,-3.7816;-2.8079,-.4581,-4.1772;-2.4116,-2.8291,-5.3122;.1335,-2.9252,-6.1082;1.8762,-1.1823,-5.7014;2.4234,-2.009,5.0661;2.3012,-3.8059,3.8965;-2.1593,-3.7348,-6.078;-3.4347,-2.7456,-4.6619;7.0368,1.1996,-1.454;6.0706,1.5791,-2.4307;8.396,1.5739,-1.6361;8.7917,2.2751,-2.7481;9.1264,1.2822,-.8751;9.8406,2.5522,-2.88;6.5167,2.2869,-3.5812;7.8393,2.6245,-3.7355;5.7915,2.5525,-4.3541;8.16,3.1621,-4.6316;3.3221,3.1222,-3.2626;2.1988,3.5249,-4.0433;4.0982,4.1389,-2.6376;3.8106,5.4688,-2.826;4.9336,3.855,-1.9954;4.4237,6.2279,-2.3338;1.9356,4.9093,-4.2324;2.7261,5.8645,-3.6445;1.0787,5.1995,-4.8482;2.5139,6.9251,-3.7948;-4.4653,-2.1131,-.2903;-4.4566,-2.9214,-1.0402;-4.9954,-2.4664,.6076;-5.0663,-1.2899,-.7215;-2.1616,-1.3911,-1.1766;-2.2885,-.3541,-1.5388;-1.0848,-1.5285,-.983;-2.4209,-2.0554,-2.0149;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650266856155</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004525298347 0.000671679526 0.016096461236 0.005338373757</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030439595 -0.002401460 0.000128206 0.000231348 0.000271530 0.000363517 0.000368943 0.000423625 0.000587328 0.000700781 0.000881858 0.000991445 0.001073249 0.001109061 0.001266309 0.001297362 0.001507907 0.001645388 0.001723871 0.001761260 0.001891351 0.002181040 0.002298046 0.002515394 0.002619599 0.002971296 0.003044834 0.003279966 0.003556728 0.003702136 0.004061318 0.004379589 0.004683741 0.004777827 0.005568086 0.005785241 0.005862010 0.006240189 0.006629539 0.007064076 0.007534827 0.007892289 0.008490901 0.009036648 0.009231186 0.009929244 0.010099836 0.011028283 0.011215924 0.011774240 0.012554328 0.012818482 0.013392455 0.013544721 0.014527784 0.015025817 0.015294594 0.015458954 0.015774807 0.016265890 0.016752623 0.017235234 0.018261697 0.018595115 0.019176495 0.020053681 0.021011518 0.021074822 0.022005992 0.022826995 0.022920449 0.024665667 0.025508444 0.026196845 0.026577805 0.028015217 0.028928069 0.029722594 0.031543001 0.031693779 0.033080706 0.033642870 0.034998989 0.035725488 0.037987930 0.038536057 0.039765501 0.040233813 0.041076602 0.044010032 0.044573866 0.044880389 0.046710425 0.049066798 0.049841106 0.050168293 0.050714100 0.051118142 0.052350188 0.052392043 0.052666155 0.052784811 0.054064075 0.054301503 0.055203240 0.055371507 0.056356692 0.056408056 0.056849535 0.057790423 0.059380357 0.060277204 0.061032515 0.061220230 0.062474479 0.063004083 0.063421879 0.064686628 0.064982363 0.066040272 0.067168081 0.068325405 0.071008624 0.072210930 0.073905515 0.075477207 0.077125297 0.082846874 0.084402551 0.085827633 0.086701974 0.087228272 0.089730004 0.090070633 0.092575806 0.094251040 0.094554946 0.095985905 0.096502392 0.097486379 0.098201882 0.099325929 0.099982285 0.101294161 0.101674516 0.102594813 0.102936688 0.103439904 0.103863437 0.105383860 0.106454879 0.106806050 0.108718300 0.109352065 0.109911244 0.111783449 0.112404450 0.114209363 0.115932060 0.118117326 0.119974647 0.120569406 0.121532016 0.123206506 0.124982459 0.125991106 0.126665083 0.131188704 0.134478291 0.135333720 0.142201190 0.142987841 0.146299426 0.146732854 0.149126645 0.150803217 0.153298876 0.153840908 0.156294787 0.159907324 0.160928176 0.172833091 0.173365680 0.177876430 0.183616598 0.184339038 0.188696991 0.189691593 0.192867890 0.193541000 0.197628351 0.199449123 0.204071110 0.206500230 0.206768665 0.209639250 0.210470975 0.214042264 0.215593697 0.217003099 0.219060562 0.224548177 0.225860706 0.231450733 0.234473707 0.234841039 0.235312931 0.244002496 0.255125645 0.256773610 0.261626296 0.267014246 0.278507559 0.282738574 0.286099317 0.289619270 0.294001808 0.301649797 0.305238049 0.305350924 0.306975719 0.314399437 0.315025799 0.321798345 0.327329403 0.329909443 0.349150077 0.349530259 0.352322388 0.354932266 0.356895086 0.361643482 0.362131953 0.378725751 0.383421209 0.390142454 0.409796791 0.424349890 0.428477214 0.450578292 0.466758855 0.469233957 0.475648640 0.481535409 0.482720029 0.489229001 0.504686083 0.511906554 0.533774243 0.565486946 0.571641181 0.589631117 0.592474985 0.602274796 0.605202780 0.639452718 0.644510810 0.645803877 0.673479817 0.674917458 0.684233878 0.691266429 0.691828251 0.698828109 0.703912575 0.715200718 0.740461332 0.748074255 0.751802734 0.760671067 0.771958829 0.778251093 0.809156013 0.810051468 0.813036669 0.820471029 0.821034787 0.824929237 0.830220097 0.832356476 0.833721326 0.842465795 0.845058745 0.846402548 0.857654894 0.864021772 0.864689454 0.872184201 0.878453767 0.883500949 0.888881998 0.891686235 0.898077213 0.900467993 0.919139900 0.922491835 0.931212350 0.934410022 0.964222119 0.975464612 0.984517078 0.999856626 1.012293251 1.025324736 1.040368756 1.048591148 1.055650505 1.063758018 1.085706806 1.087280985 1.102178097 1.105299367 1.111981007 1.114010351 1.123132833 1.135023709 1.139501058 1.170601236 1.172887495 1.176299956 1.182665315 1.187536097 1.194151519 1.216683806 1.222082704 1.267218448 1.297741628 1.314742574 1.326930817 1.329858605 1.332185648 1.333157733 1.334934060 1.341874892 1.344698611 1.357928504 1.374983396 1.381130814 1.382828501 1.390157012 1.418963222 1.421772002 1.551124028 1.660110224 1.772527934</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">107</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33121765" y3="0.01627065" z3="-0.18491435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3703152" y3="0.17774457" z3="0.43657871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62785884" y3="0.44282614" z3="-0.32250212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.69836352" y3="1.2184917" z3="-2.23816901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37436996" y3="0.39052028" z3="-1.17629634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71007987" y3="0.80973248" z3="-3.65048768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59333008" y3="1.72147369" z3="-3.10301256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.32744162" y3="2.54316228" z3="-4.57243367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53525927" y3="1.20232021" z3="-4.35813468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.44307661" y3="2.87006124" z3="-5.12825802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93452257" y3="-0.52025555" z3="-3.4530404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09287385" y3="-0.02985961" z3="-1.00444938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41185147" y3="-1.16440042" z3="-2.02580724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9383608" y3="-1.04765131" z3="-1.85731001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12133269" y3="-2.48614616" z3="-1.88604693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13855624" y3="-3.59108193" z3="0.65735683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.05267515" y3="-5.31753384" z3="-4.73470693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.27365329" y3="-5.04057403" z3="-3.70041397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85199871" y3="-4.29866572" z3="-1.09011925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76051584" y3="-4.64266406" z3="-2.85536106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5906182" y3="-5.09428362" z3="-3.23955302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.88082202" y3="-4.71699662" z3="-1.93075308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48369224" y3="-4.28801639" z3="-1.53375524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.794519" y3="-4.59039416" z3="-3.20430702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.39652794" y3="-5.40128401" z3="-3.90911876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.91854593" y3="-4.7246203" z3="-1.58611207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03143805" y3="-3.82814322" z3="0.22474044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1665384" y3="-3.5962724" z3="0.87203798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06166307" y3="-4.04878471" z3="0.44248962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15831732" y3="-3.45229764" z3="2.338237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21330922" y3="-3.24824947" z3="5.13515741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36139543" y3="-3.61358201" z3="3.04161673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98262606" y3="-3.19800431" z3="3.05998413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0075774" y3="-3.09629597" z3="4.44796931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38809548" y3="-3.51333057" z3="4.42976925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2835267" y3="-3.82628471" z3="2.49384454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01747164" y3="-3.10549742" z3="2.55674643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0721659" y3="-2.92064166" z3="4.98712823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33186699" y3="-3.64969038" z3="4.96453976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23238721" y3="-3.17658172" z3="6.22623583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41552304" y3="-3.93364464" z3="-0.63682594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17993683" y3="-3.44997879" z3="-1.09782151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51348177" y3="0.18580107" z3="-4.7189692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.05752598" y3="-1.66168498" z3="0.00791156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.85897345" y3="-0.89746287" z3="1.15692197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.78919386" y3="-0.25277513" z3="1.468781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.2868148" y3="0.57383711" z3="1.16654136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.32866171" y3="1.44511996" z3="-0.47594311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0254873" y3="-0.71730183" z3="1.38404845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.25075697" y3="1.79516083" z3="2.58712133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.82318893" y3="-0.86252659" z3="2.06575335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.5686764" y3="-0.23801219" z3="3.31435187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.12917867" y3="0.73213044" z3="-1.29275746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.48174097" y3="2.19639857" z3="-0.48968342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.28533537" y3="1.97595555" z3="-0.63899323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01854374" y3="-1.07916301" z3="2.4253797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0130785" y3="-0.27968818" z3="1.16845595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89573973" y3="-1.55586781" z3="0.68138826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.33078894" y3="1.27874884" z3="3.5601964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.7017365" y3="2.35461441" z3="2.58080171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.07048095" y3="2.53142666" z3="2.51503917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.71026737" y3="-0.70600629" z3="3.82281585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.48061472" y3="-0.38659989" z3="3.90803675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.37708331" y3="0.83956489" z3="3.17996651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84469174" y3="-0.76064476" z3="0.98987659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40864136" y3="-2.08286152" z3="0.83454298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76151456" y3="-2.74055761" z3="1.87326956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56910632" y3="-2.06419097" z3="3.07448478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0615494" y3="-0.77988688" z3="3.28660482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70680336" y3="-0.13483125" z3="2.23624379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50090916" y3="-2.56711844" z3="-0.13944765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35597316" y3="-3.74409095" z3="1.7371913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71190819" y3="-2.67192531" z3="4.09742201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89338211" y3="-0.28430109" z3="4.24343179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05781507" y3="0.89286798" z3="2.36466104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81305236" y3="0.39123994" z3="-4.31386567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7824699" y3="-0.58117815" z3="-4.51332967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41479066" y3="-1.76624489" z3="-5.14086144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.11779756" y3="-1.98286633" z3="-5.59775508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.84386621" y3="-1.00628982" z3="-5.37838413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07438359" y3="1.30849391" z3="-3.77878015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80669506" y3="-0.44333532" z3="-4.17092207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.41692717" y3="-2.82272048" z3="-5.30498797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.12816527" y3="-2.91857885" z3="-6.10011429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.87016371" y3="-1.18408368" z3="-5.69752834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41346414" y3="-1.9966746" z3="5.06194653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30848332" y3="-3.79947926" z3="3.90697626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.16769874" y3="-3.72739469" z3="-6.07242219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43752483" y3="-2.73915999" z3="-4.65118782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.03870102" y3="1.19340489" z3="-1.45726563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07291095" y3="1.57417974" z3="-2.43390436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.39896773" y3="1.56410241" z3="-1.6410813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.79614659" y3="2.26270367" z3="-2.75499004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.12924073" y3="1.27270435" z3="-0.87979633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.84642515" y3="2.53800817" z3="-2.88814136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52027335" y3="2.27942363" z3="-3.58596717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.84429957" y3="2.61421589" z3="-3.74191962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79588778" y3="2.548035" z3="-4.3582388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.16615786" y3="3.15082914" z3="-4.63935309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.32947689" y3="3.12306425" z3="-3.26841786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.20773928" y3="3.52583922" z3="-4.05104467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.10782926" y3="4.13939154" z3="-2.64474575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.82180487" y3="5.47095488" z3="-2.83365318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.9403835" y3="3.85670689" z3="-1.99889875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.43603903" y3="6.23075173" z3="-2.34158714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.94687856" y3="4.91102299" z3="-4.24132861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.73850435" y3="5.86688746" z3="-3.6533766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.08998447" y3="5.20204996" z3="-4.8567922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.52457247" y3="6.93031929" z3="-3.80123957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46708632" y3="-2.12042868" z3="-0.28990559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46074687" y3="-2.93045187" z3="-1.04081909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99592713" y3="-2.47348871" z3="0.61076968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0697089" y3="-1.29769742" z3="-0.71966431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16365763" y3="-1.39305846" z3="-1.17610318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29076461" y3="-0.35496793" z3="-1.53666306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08662035" y3="-1.53006895" z3="-0.98170794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42107714" y3="-2.056519" z3="-2.01515545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3312,.0163,-.1849;7.3703,.1777,.4366;6.6279,.4428,-.3225;4.6984,1.2185,-2.2382;4.3744,.3905,-1.1763;2.7101,.8097,-3.6505;3.5933,1.7215,-3.103;1.3274,2.5432,-4.5724;1.5353,1.2023,-4.3581;.4431,2.8701,-5.1283;2.9345,-.5203,-3.453;3.0929,-.0299,-1.0044;2.4119,-1.1644,-2.0258;.9384,-1.0477,-1.8573;3.1213,-2.4861,-1.886;-.1386,-3.5911,.6574;-.0527,-5.3175,-4.7347;-.2737,-5.0406,-3.7004;-.852,-4.2987,-1.0901;.7605,-4.6427,-2.8554;-1.5906,-5.0943,-3.2396;-1.8808,-4.717,-1.9308;.4837,-4.288,-1.5338;1.7945,-4.5904,-3.2043;-2.3965,-5.4013,-3.9091;-2.9185,-4.7246,-1.5861;-1.0314,-3.8281,.2247;-2.1665,-3.5963,.872;-3.0617,-4.0488,.4425;-2.1583,-3.4523,2.3382;-2.2133,-3.2482,5.1352;-3.3614,-3.6136,3.0416;-.9826,-3.198,3.06;-1.0076,-3.0963,4.448;-3.3881,-3.5133,4.4298;-4.2835,-3.8263,2.4938;-.0175,-3.1055,2.5567;-.0722,-2.9206,4.9871;-4.3319,-3.6497,4.9645;-2.2324,-3.1766,6.2262;1.4155,-3.9336,-.6368;2.1799,-3.45,-1.0978;.5135,.1858,-4.719;-3.0575,-1.6617,.0079;-2.859,-.8975,1.1569;-1.7892,-.2528,1.4688;-.2868,.5738,1.1665;-.3287,1.4451,-.4759;1.0255,-.7173,1.384;-.2508,1.7952,2.5871;-3.8232,-.8625,2.0658;-3.5687,-.238,3.3144;-.1292,.7321,-1.2928;.4817,2.1964,-.4897;-1.2853,1.976,-.639;1.0185,-1.0792,2.4254;2.0131,-.2797,1.1685;.8957,-1.5559,.6814;-.3308,1.2787,3.5602;.7017,2.3546,2.5808;-1.0705,2.5314,2.515;-2.7103,-.706,3.8228;-4.4806,-.3866,3.908;-3.3771,.8396,3.18;4.8447,-.7606,.9899;4.4086,-2.0829,.8345;3.7615,-2.7406,1.8733;3.5691,-2.0642,3.0745;4.0615,-.7799,3.2866;4.7068,-.1348,2.2362;4.5009,-2.5671,-.1394;3.356,-3.7441,1.7372;2.7119,-2.6719,4.0974;3.8934,-.2843,4.2434;5.0578,.8929,2.3647;-.8131,.3912,-4.3139;-1.7825,-.5812,-4.5133;-1.4148,-1.7662,-5.1409;-.1178,-1.9829,-5.5978;.8439,-1.0063,-5.3784;-1.0744,1.3085,-3.7788;-2.8067,-.4433,-4.1709;-2.4169,-2.8227,-5.305;.1282,-2.9186,-6.1001;1.8702,-1.1841,-5.6975;2.4135,-1.9967,5.0619;2.3085,-3.7995,3.907;-2.1677,-3.7274,-6.0724;-3.4375,-2.7392,-4.6512;7.0387,1.1934,-1.4573;6.0729,1.5742,-2.4339;8.399,1.5641,-1.6411;8.7961,2.2627,-2.755;9.1292,1.2727,-.8798;9.8464,2.538,-2.8881;6.5203,2.2794,-3.586;7.8443,2.6142,-3.7419;5.7959,2.548,-4.3582;8.1662,3.1508,-4.6394;3.3295,3.1231,-3.2684;2.2077,3.5258,-4.051;4.1078,4.1394,-2.6447;3.8218,5.471,-2.8337;4.9404,3.8567,-1.9989;4.436,6.2308,-2.3416;1.9469,4.911,-4.2413;2.7385,5.8669,-3.6534;1.09,5.202,-4.8568;2.5246,6.9303,-3.8012;-4.4671,-2.1204,-.2899;-4.4607,-2.9305,-1.0408;-4.9959,-2.4735,.6108;-5.0697,-1.2977,-.7197;-2.1637,-1.3931,-1.1761;-2.2908,-.355,-1.5367;-1.0866,-1.5301,-.9817;-2.4211,-2.0565,-2.0152;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650292460530</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003676991197 0.000619807185 0.017523397490 0.005338266997</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030445889 -0.001976858 0.000128043 0.000232619 0.000271488 0.000363619 0.000370260 0.000423668 0.000589778 0.000700773 0.000883725 0.000992498 0.001075545 0.001109333 0.001268212 0.001300911 0.001508265 0.001646489 0.001731222 0.001761246 0.001896023 0.002190885 0.002298357 0.002527019 0.002619948 0.002971790 0.003044469 0.003280155 0.003561796 0.003724159 0.004063693 0.004379594 0.004684304 0.004781749 0.005570015 0.005788452 0.005861985 0.006239744 0.006629562 0.007068815 0.007535393 0.007893332 0.008492471 0.009048351 0.009234010 0.010031169 0.010121004 0.011065623 0.011215185 0.011779607 0.012577589 0.012819663 0.013419145 0.013548003 0.014533638 0.015051278 0.015295046 0.015459736 0.015801690 0.016350573 0.016753459 0.017235807 0.018266220 0.018620981 0.019192691 0.020063410 0.021011653 0.021082464 0.022009228 0.022866928 0.023112317 0.024666123 0.025516758 0.026195883 0.026588552 0.028083789 0.028969890 0.029733772 0.031582094 0.031712099 0.033087185 0.033642755 0.035003381 0.035732087 0.038020804 0.038543216 0.039823578 0.040234675 0.041076708 0.044045182 0.044575790 0.044898831 0.046710603 0.049076825 0.049927278 0.050197222 0.050714043 0.051120203 0.052350939 0.052391775 0.052667983 0.052795796 0.054070279 0.054303278 0.055206992 0.055370848 0.056357132 0.056420437 0.056851907 0.057790818 0.059413213 0.060302662 0.061135551 0.061228199 0.062473984 0.063006454 0.063437404 0.064687617 0.064986128 0.066054003 0.067195976 0.068341527 0.071059455 0.072257208 0.073905757 0.075551976 0.077125688 0.082890426 0.084402503 0.085880145 0.086738522 0.087228689 0.089764930 0.090074879 0.092638109 0.094256360 0.094555153 0.095992774 0.096519893 0.097486619 0.098210184 0.099326909 0.099982446 0.101306735 0.101677885 0.102597324 0.103001731 0.103601523 0.103878123 0.105540001 0.106458938 0.106816271 0.108718305 0.109427580 0.109938706 0.111834597 0.112413523 0.114235739 0.115932118 0.118325556 0.119975651 0.120670534 0.121589925 0.123204378 0.124982464 0.126004471 0.126685028 0.131188049 0.134479443 0.135336086 0.142204481 0.142991216 0.146373700 0.146737512 0.149139925 0.150860121 0.153426192 0.153927159 0.156301762 0.159906903 0.160933055 0.172839241 0.173366654 0.177878524 0.183616698 0.184344927 0.188696739 0.189696601 0.192869139 0.193542588 0.197630635 0.199468048 0.204104707 0.206504721 0.206768664 0.209639562 0.210472115 0.214078850 0.215603204 0.217053806 0.219110665 0.224552251 0.225868424 0.231455133 0.234473681 0.234845661 0.235325401 0.244004707 0.255128077 0.256776847 0.261668731 0.267031666 0.278515406 0.282743436 0.286099605 0.289642503 0.294037743 0.301804795 0.305326025 0.305380879 0.306978700 0.314423138 0.315071835 0.321802814 0.327380853 0.329966741 0.349161556 0.349606336 0.352331894 0.354934407 0.356989013 0.361648297 0.362136643 0.378744276 0.383483907 0.390143431 0.409798613 0.424499545 0.428529037 0.450583281 0.466816330 0.469238613 0.475652384 0.481535554 0.482845099 0.489273535 0.504718385 0.511920342 0.533826765 0.565523972 0.571752223 0.589707023 0.592477329 0.602513908 0.605264696 0.639623335 0.644685747 0.645816170 0.673485004 0.675107453 0.684250844 0.691272055 0.691951108 0.698828130 0.703913199 0.715220235 0.740466898 0.749393799 0.752133657 0.760812819 0.771967053 0.778277707 0.809218792 0.810056195 0.813042804 0.820512026 0.821036168 0.825085756 0.830359900 0.832418121 0.833866366 0.842490354 0.845059032 0.846408157 0.857655929 0.864036025 0.864690403 0.872206032 0.878558294 0.883555463 0.888891732 0.891686469 0.898530865 0.900823972 0.919241562 0.922493443 0.931277283 0.934491857 0.964228151 0.975473554 0.984542396 0.999861744 1.012450430 1.025332865 1.040412455 1.048620974 1.055662508 1.063825289 1.085739507 1.087330329 1.102219533 1.105299461 1.111982705 1.114050233 1.123133841 1.135023742 1.139532217 1.170601282 1.172949927 1.176307029 1.182982418 1.187733951 1.194160231 1.216741599 1.222243210 1.268004778 1.298040073 1.314744119 1.326943672 1.329964179 1.332265679 1.333268992 1.335000906 1.341912941 1.344711302 1.357964982 1.374983364 1.381136007 1.382915292 1.390330620 1.418987752 1.421943142 1.551124682 1.660111822 1.772565856</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">108</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33196484" y3="0.01673934" z3="-0.18566276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37205166" y3="0.17440398" z3="0.43414829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.62988514" y3="0.44078347" z3="-0.32460831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70076528" y3="1.21792374" z3="-2.24021659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3754908" y3="0.3923072" z3="-1.17680263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71116249" y3="0.81123056" z3="-3.65113833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59650263" y3="1.72236848" z3="-3.10517183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.32985666" y3="2.54784502" z3="-4.57182839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53673302" y3="1.20471023" z3="-4.3587847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.44619664" y3="2.87634607" z3="-5.12753628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93321966" y3="-0.51865548" z3="-3.45153596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09322372" y3="-0.02450919" z3="-1.00363186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41129101" y3="-1.1602645" z3="-2.02286496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93795275" y3="-1.04378748" z3="-1.85300912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12201696" y3="-2.48121864" z3="-1.88229862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13846866" y3="-3.59063257" z3="0.65678451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.04587339" y3="-5.3143595" z3="-4.7358266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.26828016" y3="-5.03778503" z3="-3.70169137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85032669" y3="-4.29747237" z3="-1.09146595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76472529" y3="-4.63926408" z3="-2.85557362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.58532716" y3="-5.09355258" z3="-3.24166261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87674452" y3="-4.71789151" z3="-1.93276272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48537371" y3="-4.28429659" z3="-1.53433726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79933712" y3="-4.58681655" z3="-3.20371456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.39146446" y3="-5.40080112" z3="-3.91174039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.91254237" y3="-4.73194134" z3="-1.58902151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03082546" y3="-3.82883847" z3="0.22373875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16681247" y3="-3.59950821" z3="0.87084873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05994111" y3="-4.05479493" z3="0.44124357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15824649" y3="-3.45712608" z3="2.33734506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21312317" y3="-3.25604752" z3="5.13445242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36006689" y3="-3.62419268" z3="3.04088972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98311632" y3="-3.19883127" z3="3.05904375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00790611" y3="-3.0988615" z3="4.44718513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38692393" y3="-3.52521704" z3="4.42910481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28094801" y3="-3.84077668" z3="2.49311559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01917249" y3="-3.1003727" z3="2.55548183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07347712" y3="-2.91919612" z3="4.98629358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33035141" y3="-3.66527275" z3="4.9640355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23226721" y3="-3.18550577" z3="6.22558391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41588437" y3="-3.92948" z3="-0.63640209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18162477" y3="-3.44574088" z3="-1.09646199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51247807" y3="0.19015878" z3="-4.71631486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06121187" y3="-1.66752076" z3="0.00865639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.86182929" y3="-0.9042021" z3="1.15873698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.78736108" y3="-0.26239415" z3="1.46953337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.29497914" y3="0.5754264" z3="1.16934174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.34031768" y3="1.44747474" z3="-0.4727279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.02251644" y3="-0.71032789" z3="1.38680369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.26492274" y3="1.79530257" z3="2.59046761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.82591162" y3="-0.86985624" z3="2.06797228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.57368214" y3="-0.24738958" z3="3.3172515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.13847667" y3="0.73240567" z3="-1.28906743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.47183194" y3="2.20037659" z3="-0.48735457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.29799331" y3="1.97101604" z3="-0.63632739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01672365" y3="-1.07362121" z3="2.42836197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.01328804" y3="-0.27324149" z3="1.17110831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89304906" y3="-1.55070766" z3="0.68520748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.34306479" y3="1.27814818" z3="3.56302708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.68766374" y3="2.35700534" z3="2.58426236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.08670087" y3="2.53016733" z3="2.51838109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.71366643" y3="-0.7120406" z3="3.82516559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.48419319" y3="-0.40128684" z3="3.91086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.38781169" y3="0.83022754" z3="3.18355568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8444317" y3="-0.75697684" z3="0.99064659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40835645" y3="-2.07923478" z3="0.83765057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76058065" y3="-2.73497035" z3="1.87709371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56755359" y3="-2.05646714" z3="3.07687997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05992511" y3="-0.77186669" z3="3.28683929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70587324" y3="-0.1287877" z3="2.2356686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50115952" y3="-2.56493255" z3="-0.1355098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35510582" y3="-3.73862775" z3="1.74256394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.71007114" y3="-2.66269515" z3="4.10048482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89118531" y3="-0.27458281" z3="4.24256199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05699726" y3="0.89904241" z3="2.36261828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81176451" y3="0.39973452" z3="-4.31066749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78243462" y3="-0.57318802" z3="-4.51091204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41768617" y3="-1.75926077" z3="-5.13555334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12332886" y3="-1.98033045" z3="-5.59432275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83993533" y3="-1.00324644" z3="-5.37425804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07059979" y3="1.31784076" z3="-3.77840011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80842956" y3="-0.43693968" z3="-4.16429048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42153975" y3="-2.81250152" z3="-5.29503226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.12100559" y3="-2.91669762" z3="-6.09631724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86923754" y3="-1.17831731" z3="-5.69722695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.41152328" y3="-1.9850431" z3="5.0653409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30625855" y3="-3.79187531" z3="3.90994836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.1762285" y3="-3.71651284" z3="-6.06550933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43944908" y3="-2.72880257" z3="-4.6372867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04200694" y3="1.18930685" z3="-1.46077447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07638158" y3="1.57088818" z3="-2.43729501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.40308091" y3="1.55652444" z3="-1.64619607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.80127485" y3="2.25330742" z3="-2.76108908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.13309344" y3="1.26358873" z3="-0.8853273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.85200519" y3="2.52630033" z3="-2.89524035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52455806" y3="2.2728516" z3="-3.59083442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.84921101" y3="2.60471651" z3="-3.74805166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79962272" y3="2.5405848" z3="-4.36318045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.17176733" y3="3.13896648" z3="-4.64634215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.33487464" y3="3.12494418" z3="-3.27155259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.21216146" y3="3.53035528" z3="-4.05182045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.11681234" y3="4.13996584" z3="-2.65153569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.8337151" y3="5.47155539" z3="-2.84280331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.9502938" y3="3.85540005" z3="-2.00729809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.44931711" y3="6.23112774" z3="-2.35181833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.95499132" y3="4.91540383" z3="-4.24555506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.75038967" y3="5.8692579" z3="-3.66193101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.09910284" y3="5.20697741" z3="-4.86208491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.54209587" y3="6.93083074" z3="-3.8150179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4693966" y3="-2.1280305" z3="-0.29017666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45805176" y3="-2.93438623" z3="-1.04196927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99752515" y3="-2.48545562" z3="0.60750997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07346108" y3="-1.30592039" z3="-0.71894178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16711109" y3="-1.39632305" z3="-1.17511725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29567555" y3="-0.35842029" z3="-1.53429641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08988073" y3="-1.53241255" z3="-0.98119695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42521143" y3="-2.05876648" z3="-2.01555816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.332,.0167,-.1857;7.3721,.1744,.4341;6.6299,.4408,-.3246;4.7008,1.2179,-2.2402;4.3755,.3923,-1.1768;2.7112,.8112,-3.6511;3.5965,1.7224,-3.1052;1.3299,2.5478,-4.5718;1.5367,1.2047,-4.3588;.4462,2.8763,-5.1275;2.9332,-.5187,-3.4515;3.0932,-.0245,-1.0036;2.4113,-1.1603,-2.0229;.938,-1.0438,-1.853;3.122,-2.4812,-1.8823;-.1385,-3.5906,.6568;-.0459,-5.3144,-4.7358;-.2683,-5.0378,-3.7017;-.8503,-4.2975,-1.0915;.7647,-4.6393,-2.8556;-1.5853,-5.0936,-3.2417;-1.8767,-4.7179,-1.9328;.4854,-4.2843,-1.5343;1.7993,-4.5868,-3.2037;-2.3915,-5.4008,-3.9117;-2.9125,-4.7319,-1.589;-1.0308,-3.8288,.2237;-2.1668,-3.5995,.8708;-3.0599,-4.0548,.4412;-2.1582,-3.4571,2.3373;-2.2131,-3.256,5.1345;-3.3601,-3.6242,3.0409;-.9831,-3.1988,3.059;-1.0079,-3.0989,4.4472;-3.3869,-3.5252,4.4291;-4.2809,-3.8408,2.4931;-.0192,-3.1004,2.5555;-.0735,-2.9192,4.9863;-4.3304,-3.6653,4.964;-2.2323,-3.1855,6.2256;1.4159,-3.9295,-.6364;2.1816,-3.4457,-1.0965;.5125,.1902,-4.7163;-3.0612,-1.6675,.0087;-2.8618,-.9042,1.1587;-1.7874,-.2624,1.4695;-.295,.5754,1.1693;-.3403,1.4475,-.4727;1.0225,-.7103,1.3868;-.2649,1.7953,2.5905;-3.8259,-.8699,2.068;-3.5737,-.2474,3.3173;-.1385,.7324,-1.2891;.4718,2.2004,-.4874;-1.298,1.971,-.6363;1.0167,-1.0736,2.4284;2.0133,-.2732,1.1711;.893,-1.5507,.6852;-.3431,1.2781,3.563;.6877,2.357,2.5843;-1.0867,2.5302,2.5184;-2.7137,-.712,3.8252;-4.4842,-.4013,3.9109;-3.3878,.8302,3.1836;4.8444,-.757,.9906;4.4084,-2.0792,.8377;3.7606,-2.735,1.8771;3.5676,-2.0565,3.0769;4.0599,-.7719,3.2868;4.7059,-.1288,2.2357;4.5012,-2.5649,-.1355;3.3551,-3.7386,1.7426;2.7101,-2.6627,4.1005;3.8912,-.2746,4.2426;5.057,.899,2.3626;-.8118,.3997,-4.3107;-1.7824,-.5732,-4.5109;-1.4177,-1.7593,-5.1356;-.1233,-1.9803,-5.5943;.8399,-1.0032,-5.3743;-1.0706,1.3178,-3.7784;-2.8084,-.4369,-4.1643;-2.4215,-2.8125,-5.295;.121,-2.9167,-6.0963;1.8692,-1.1783,-5.6972;2.4115,-1.985,5.0653;2.3063,-3.7919,3.9099;-2.1762,-3.7165,-6.0655;-3.4394,-2.7288,-4.6373;7.042,1.1893,-1.4608;6.0764,1.5709,-2.4373;8.4031,1.5565,-1.6462;8.8013,2.2533,-2.7611;9.1331,1.2636,-.8853;9.852,2.5263,-2.8952;6.5246,2.2729,-3.5908;7.8492,2.6047,-3.7481;5.7996,2.5406,-4.3632;8.1718,3.139,-4.6463;3.3349,3.1249,-3.2716;2.2122,3.5304,-4.0518;4.1168,4.14,-2.6515;3.8337,5.4716,-2.8428;4.9503,3.8554,-2.0073;4.4493,6.2311,-2.3518;1.955,4.9154,-4.2456;2.7504,5.8693,-3.6619;1.0991,5.207,-4.8621;2.5421,6.9308,-3.815;-4.4694,-2.128,-.2902;-4.4581,-2.9344,-1.042;-4.9975,-2.4855,.6075;-5.0735,-1.3059,-.7189;-2.1671,-1.3963,-1.1751;-2.2957,-.3584,-1.5343;-1.0899,-1.5324,-.9812;-2.4252,-2.0588,-2.0156;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650314200979</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002877572034 0.000569608123 0.019911131766 0.005337808443</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030448357 -0.001752544 0.000128429 0.000232641 0.000273241 0.000363615 0.000370091 0.000423701 0.000590738 0.000701309 0.000884680 0.001006749 0.001075493 0.001112103 0.001275306 0.001300835 0.001508309 0.001646504 0.001732137 0.001761432 0.001896887 0.002196495 0.002300246 0.002549658 0.002624936 0.002978331 0.003046625 0.003280213 0.003561889 0.003746444 0.004067147 0.004386076 0.004689203 0.004788323 0.005570827 0.005792186 0.005862649 0.006244748 0.006630203 0.007076794 0.007536668 0.007894360 0.008493559 0.009056217 0.009257671 0.010050641 0.010170591 0.011094654 0.011221377 0.011785191 0.012578455 0.012820159 0.013445931 0.013558681 0.014537173 0.015073169 0.015295974 0.015464511 0.015818671 0.016419041 0.016759032 0.017241196 0.018267837 0.018658602 0.019205109 0.020097207 0.021011973 0.021098441 0.022021315 0.022882777 0.023391501 0.024667102 0.025520780 0.026201959 0.026591630 0.028115233 0.029015850 0.029761535 0.031614224 0.031746858 0.033086762 0.033653866 0.035007813 0.035733883 0.038032639 0.038551052 0.039849274 0.040238668 0.041080708 0.044063089 0.044576679 0.044904358 0.046711000 0.049078440 0.049963139 0.050199543 0.050714489 0.051125592 0.052351130 0.052394940 0.052673848 0.052805012 0.054078927 0.054304259 0.055207521 0.055381425 0.056358187 0.056428369 0.056855975 0.057794706 0.059441330 0.060301973 0.061186462 0.061247811 0.062477460 0.063009034 0.063476476 0.064693811 0.064988388 0.066056776 0.067261564 0.068345654 0.071102828 0.072286202 0.073906339 0.075574585 0.077129148 0.082928481 0.084406552 0.085965021 0.086747799 0.087234953 0.089762473 0.090089583 0.092662183 0.094256689 0.094555276 0.096016643 0.096559741 0.097486622 0.098231304 0.099327904 0.099982947 0.101320839 0.101677787 0.102597844 0.103016253 0.103684783 0.103889926 0.105702754 0.106469326 0.106833969 0.108718415 0.109485833 0.109967433 0.111864362 0.112422439 0.114255627 0.115932400 0.118447382 0.119977607 0.120739734 0.121625414 0.123219569 0.124982632 0.126023301 0.126709557 0.131199752 0.134485002 0.135339948 0.142207633 0.142992160 0.146426880 0.146744099 0.149176740 0.150923090 0.153473766 0.154004901 0.156311444 0.159912367 0.160936992 0.172839280 0.173385779 0.177880760 0.183616781 0.184361760 0.188701780 0.189698792 0.192870455 0.193545529 0.197645611 0.199471160 0.204125220 0.206504814 0.206768895 0.209640747 0.210476815 0.214096335 0.215602779 0.217092176 0.219169929 0.224552161 0.225877795 0.231459380 0.234479808 0.234859142 0.235353552 0.244012387 0.255129186 0.256783829 0.261748192 0.267033712 0.278518293 0.282746821 0.286100221 0.289660876 0.294059031 0.301809358 0.305349699 0.305492163 0.306981221 0.314454575 0.315071527 0.321805832 0.327396840 0.329995188 0.349161612 0.349763917 0.352348066 0.354937698 0.357165774 0.361667690 0.362147742 0.378771286 0.383496763 0.390144013 0.409814908 0.424544623 0.428587612 0.450596902 0.466897609 0.469298462 0.475655989 0.481537146 0.482850203 0.489343349 0.504737867 0.511924686 0.533889076 0.565552738 0.571849185 0.589706227 0.592503671 0.602765345 0.605388100 0.639922892 0.644825557 0.645833110 0.673486585 0.675246191 0.684280656 0.691273774 0.691969692 0.698828276 0.703913385 0.715230197 0.740472128 0.750098671 0.752602407 0.760879315 0.771967203 0.778311819 0.809314026 0.810060653 0.813047154 0.820577883 0.821036177 0.825200918 0.830487095 0.832477798 0.834114108 0.842496181 0.845060173 0.846411000 0.857656748 0.864066531 0.864691882 0.872218588 0.878620992 0.883606705 0.888902473 0.891687465 0.898642747 0.900988371 0.919362756 0.922493816 0.931405433 0.934514991 0.964228936 0.975482819 0.984576824 0.999893437 1.012730822 1.025336366 1.040459473 1.048632979 1.055677389 1.063964236 1.085788487 1.087407874 1.102244931 1.105304956 1.111982686 1.114072255 1.123138388 1.135023795 1.139558691 1.170601757 1.172994175 1.176365354 1.183096713 1.187829650 1.194160555 1.216749543 1.222555948 1.268593072 1.298227437 1.314793414 1.326952237 1.330077599 1.332276308 1.333377473 1.335109144 1.341921987 1.344713801 1.358004524 1.374984012 1.381136270 1.382923506 1.390509180 1.419020658 1.422050471 1.551127435 1.660113383 1.772676385</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">109</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33359184" y3="0.01989776" z3="-0.18566395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37446194" y3="0.17581421" z3="0.43339683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63213336" y3="0.4424467" z3="-0.32525168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70341216" y3="1.21997432" z3="-2.24123344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37711123" y3="0.39531454" z3="-1.17700665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71216865" y3="0.81431074" z3="-3.65076363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.59949756" y3="1.72454241" z3="-3.10661434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33514553" y3="2.55079606" z3="-4.57589753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53788192" y3="1.20996355" z3="-4.35758375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45101181" y3="2.88039434" z3="-5.13047782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9322348" y3="-0.51613583" z3="-3.45071238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0941215" y3="-0.02065999" z3="-1.00310446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41091606" y3="-1.15663656" z3="-2.02113227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93772532" y3="-1.03963211" z3="-1.85018366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12078576" y3="-2.47809913" z3="-1.88031371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13677986" y3="-3.59180639" z3="0.65633659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.04067249" y3="-5.31133915" z3="-4.73725252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.26365873" y3="-5.03615197" z3="-3.70290987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84705752" y3="-4.29903665" z3="-1.0923292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7688099" y3="-4.63776674" z3="-2.85583326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.58116318" y3="-5.09308191" z3="-3.24387883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87365192" y3="-4.71859335" z3="-1.93484313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48933024" y3="-4.28526326" z3="-1.53412586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80266961" y3="-4.58182885" z3="-3.20282692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.38663492" y3="-5.39941696" z3="-3.91504536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.91231663" y3="-4.72791817" z3="-1.59154869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0288963" y3="-3.83081194" z3="0.22298722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16505971" y3="-3.60451834" z3="0.87049133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05833995" y3="-4.06013191" z3="0.4402665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15730184" y3="-3.46251018" z3="2.33688343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2131708" y3="-3.26290807" z3="5.13399986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35884397" y3="-3.63404988" z3="3.04035804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98348526" y3="-3.19944252" z3="3.05851304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00880712" y3="-3.10022614" z3="4.44665136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38601926" y3="-3.53601019" z3="4.4286392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27971639" y3="-3.85270461" z3="2.4924536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01941702" y3="-3.09739165" z3="2.55466361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07467866" y3="-2.91766616" z3="4.98582792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32879244" y3="-3.68000605" z3="4.96355002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23256254" y3="-3.1931671" z3="6.2251695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4196573" y3="-3.9307576" z3="-0.63532509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18175716" y3="-3.44267862" z3="-1.09426165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51233683" y3="0.19637531" z3="-4.71400915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06298649" y3="-1.67215641" z3="0.00914938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.86736333" y3="-0.91065238" z3="1.16000482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.79905571" y3="-0.26474024" z3="1.47402783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.30246081" y3="0.57374122" z3="1.17304323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.34858694" y3="1.44635837" z3="-0.46910977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0201448" y3="-0.70704558" z3="1.3896993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.27687552" y3="1.7943747" z3="2.59427823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.83200272" y3="-0.88079074" z3="2.06839679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.57940072" y3="-0.25847754" z3="3.31866177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.14315422" y3="0.73428598" z3="-1.28607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.45557166" y3="2.20377653" z3="-0.48117922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.30870687" y3="1.96799895" z3="-0.63328805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0184998" y3="-1.06738343" z3="2.43153757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.00455233" y3="-0.26308545" z3="1.17083392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8945091" y3="-1.54776301" z3="0.68868884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.35302106" y3="1.27706539" z3="3.56713883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.67111418" y3="2.36160139" z3="2.58847397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.10251237" y3="2.52410713" z3="2.52238077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.71945334" y3="-0.72561146" z3="3.82581363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49113252" y3="-0.41053479" z3="3.91244572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.38995209" y3="0.82013142" z3="3.18681818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84499439" y3="-0.7531392" z3="0.99103896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4084357" y3="-2.07554627" z3="0.83930374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76025013" y3="-2.72985895" z3="1.87951977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56663091" y3="-2.0497026" z3="3.07834736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05882105" y3="-0.76476516" z3="3.28674687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70579513" y3="-0.12334231" z3="2.23524269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50143192" y3="-2.56263121" z3="-0.13317985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3548991" y3="-3.73372347" z3="1.74643567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70810836" y3="-2.65436508" z3="4.10195961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88937547" y3="-0.26588125" z3="4.24148756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.057149" y3="0.90455117" z3="2.36089111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81277224" y3="0.40624351" z3="-4.30705202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78487452" y3="-0.56513403" z3="-4.50386778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42125343" y3="-1.75230239" z3="-5.12960419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12600145" y3="-1.97311142" z3="-5.58947831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83851414" y3="-0.99784975" z3="-5.37251698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07103844" y3="1.3254286" z3="-3.77357337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80855077" y3="-0.42483341" z3="-4.15913423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42574659" y3="-2.80656197" z3="-5.28771376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11639412" y3="-2.91029631" z3="-6.09065556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86375786" y3="-1.17872342" z3="-5.69378769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.40236833" y3="-1.97332162" z3="5.06059195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31048221" y3="-3.78546518" z3="3.91733721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18295939" y3="-3.70988462" z3="-6.05853524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44180456" y3="-2.72354761" z3="-4.62625877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04506763" y3="1.18884924" z3="-1.46250188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07968553" y3="1.57039385" z3="-2.43929453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.40674801" y3="1.55083704" z3="-1.649932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.80554699" y3="2.24024387" z3="-2.76785169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.13672017" y3="1.25801749" z3="-0.88888813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.85654419" y3="2.5063892" z3="-2.90444723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52880601" y3="2.26781427" z3="-3.59491106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.85382547" y3="2.59214829" z3="-3.75486834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80427882" y3="2.53561902" z3="-4.36751711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.17681818" y3="3.12056718" z3="-4.65558273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.34105771" y3="3.12709515" z3="-3.27599176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.21992595" y3="3.53221657" z3="-4.05826474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.12488813" y3="4.14235028" z3="-2.6573012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.84558719" y3="5.47380658" z3="-2.85188077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.95847677" y3="3.8570881" z3="-2.01360525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.4651404" y3="6.23148604" z3="-2.36524249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.96486577" y3="4.9180547" z3="-4.25298507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.76209314" y3="5.87232655" z3="-3.67032509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.10785519" y3="5.21132368" z3="-4.8673954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.55321613" y3="6.93593801" z3="-3.82219945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47023304" y3="-2.13537681" z3="-0.29083497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45911597" y3="-2.94086263" z3="-1.04535414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99726395" y3="-2.4956784" z3="0.60720275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07689653" y3="-1.31373309" z3="-0.7169772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1694711" y3="-1.39830524" z3="-1.173975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2989714" y3="-0.35977386" z3="-1.53148475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09222999" y3="-1.53345603" z3="-0.97972435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42616963" y3="-2.0596306" z3="-2.01525533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3336,.0199,-.1857;7.3745,.1758,.4334;6.6321,.4424,-.3253;4.7034,1.22,-2.2412;4.3771,.3953,-1.177;2.7122,.8143,-3.6508;3.5995,1.7245,-3.1066;1.3351,2.5508,-4.5759;1.5379,1.21,-4.3576;.451,2.8804,-5.1305;2.9322,-.5161,-3.4507;3.0941,-.0207,-1.0031;2.4109,-1.1566,-2.0211;.9377,-1.0396,-1.8502;3.1208,-2.4781,-1.8803;-.1368,-3.5918,.6563;-.0407,-5.3113,-4.7373;-.2637,-5.0362,-3.7029;-.8471,-4.299,-1.0923;.7688,-4.6378,-2.8558;-1.5812,-5.0931,-3.2439;-1.8737,-4.7186,-1.9348;.4893,-4.2853,-1.5341;1.8027,-4.5818,-3.2028;-2.3866,-5.3994,-3.915;-2.9123,-4.7279,-1.5915;-1.0289,-3.8308,.223;-2.1651,-3.6045,.8705;-3.0583,-4.0601,.4403;-2.1573,-3.4625,2.3369;-2.2132,-3.2629,5.134;-3.3588,-3.634,3.0404;-.9835,-3.1994,3.0585;-1.0088,-3.1002,4.4467;-3.386,-3.536,4.4286;-4.2797,-3.8527,2.4925;-.0194,-3.0974,2.5547;-.0747,-2.9177,4.9858;-4.3288,-3.68,4.9636;-2.2326,-3.1932,6.2252;1.4197,-3.9308,-.6353;2.1818,-3.4427,-1.0943;.5123,.1964,-4.714;-3.063,-1.6722,.0091;-2.8674,-.9107,1.16;-1.7991,-.2647,1.474;-.3025,.5737,1.173;-.3486,1.4464,-.4691;1.0201,-.707,1.3897;-.2769,1.7944,2.5943;-3.832,-.8808,2.0684;-3.5794,-.2585,3.3187;-.1432,.7343,-1.2861;.4556,2.2038,-.4812;-1.3087,1.968,-.6333;1.0185,-1.0674,2.4315;2.0046,-.2631,1.1708;.8945,-1.5478,.6887;-.353,1.2771,3.5671;.6711,2.3616,2.5885;-1.1025,2.5241,2.5224;-2.7195,-.7256,3.8258;-4.4911,-.4105,3.9124;-3.39,.8201,3.1868;4.845,-.7531,.991;4.4084,-2.0755,.8393;3.7603,-2.7299,1.8795;3.5666,-2.0497,3.0783;4.0588,-.7648,3.2867;4.7058,-.1233,2.2352;4.5014,-2.5626,-.1332;3.3549,-3.7337,1.7464;2.7081,-2.6544,4.102;3.8894,-.2659,4.2415;5.0571,.9046,2.3609;-.8128,.4062,-4.3071;-1.7849,-.5651,-4.5039;-1.4213,-1.7523,-5.1296;-.126,-1.9731,-5.5895;.8385,-.9978,-5.3725;-1.071,1.3254,-3.7736;-2.8086,-.4248,-4.1591;-2.4257,-2.8066,-5.2877;.1164,-2.9103,-6.0907;1.8638,-1.1787,-5.6938;2.4024,-1.9733,5.0606;2.3105,-3.7855,3.9173;-2.183,-3.7099,-6.0585;-3.4418,-2.7235,-4.6263;7.0451,1.1888,-1.4625;6.0797,1.5704,-2.4393;8.4067,1.5508,-1.6499;8.8055,2.2402,-2.7679;9.1367,1.258,-.8889;9.8565,2.5064,-2.9044;6.5288,2.2678,-3.5949;7.8538,2.5921,-3.7549;5.8043,2.5356,-4.3675;8.1768,3.1206,-4.6556;3.3411,3.1271,-3.276;2.2199,3.5322,-4.0583;4.1249,4.1424,-2.6573;3.8456,5.4738,-2.8519;4.9585,3.8571,-2.0136;4.4651,6.2315,-2.3652;1.9649,4.9181,-4.253;2.7621,5.8723,-3.6703;1.1079,5.2113,-4.8674;2.5532,6.9359,-3.8222;-4.4702,-2.1354,-.2908;-4.4591,-2.9409,-1.0454;-4.9973,-2.4957,.6072;-5.0769,-1.3137,-.717;-2.1695,-1.3983,-1.174;-2.299,-.3598,-1.5315;-1.0922,-1.5335,-.9797;-2.4262,-2.0596,-2.0153;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650329755032</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002550569835 0.000551518264 0.019063826824 0.005336153777</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030449776 -0.001833533 0.000128374 0.000234614 0.000273507 0.000363739 0.000376749 0.000424230 0.000591229 0.000701479 0.000886091 0.001034823 0.001077561 0.001123295 0.001281132 0.001307573 0.001508846 0.001647306 0.001732425 0.001761617 0.001897742 0.002201158 0.002301007 0.002563394 0.002647750 0.002993876 0.003059445 0.003284413 0.003562182 0.003754959 0.004067275 0.004406952 0.004699261 0.004800134 0.005570930 0.005792625 0.005865867 0.006251819 0.006631556 0.007162344 0.007542736 0.007895403 0.008494084 0.009059648 0.009336315 0.010049647 0.010200007 0.011109222 0.011239072 0.011789532 0.012583265 0.012837653 0.013457543 0.013587672 0.014538746 0.015089084 0.015297697 0.015471326 0.015825329 0.016435605 0.016771589 0.017246352 0.018269614 0.018690789 0.019208698 0.020137661 0.021015166 0.021118382 0.022044756 0.022904186 0.023743180 0.024668815 0.025523878 0.026222738 0.026591421 0.028118320 0.029044435 0.029843329 0.031626395 0.031802446 0.033091909 0.033695997 0.035017055 0.035734062 0.038035596 0.038552772 0.039851379 0.040245235 0.041109160 0.044074400 0.044576553 0.044905493 0.046711001 0.049078333 0.049972315 0.050204014 0.050714808 0.051130117 0.052351168 0.052403358 0.052683974 0.052808538 0.054083065 0.054313797 0.055207716 0.055403417 0.056360968 0.056432022 0.056857292 0.057796462 0.059474852 0.060306348 0.061203758 0.061269025 0.062479923 0.063009662 0.063538688 0.064707972 0.064990093 0.066056633 0.067320773 0.068345907 0.071155234 0.072293653 0.073907967 0.075576895 0.077135894 0.082954718 0.084424173 0.086067525 0.086747786 0.087245651 0.089780411 0.090120343 0.092669601 0.094258183 0.094555436 0.096045893 0.096615962 0.097486815 0.098255494 0.099329871 0.099982906 0.101341568 0.101688226 0.102605399 0.103019112 0.103709984 0.103893173 0.105805697 0.106497578 0.106865196 0.108718962 0.109526706 0.110009426 0.111871964 0.112436103 0.114270182 0.115932457 0.118486611 0.119989111 0.120778661 0.121635496 0.123245549 0.124982897 0.126042007 0.126725761 0.131228494 0.134490990 0.135345483 0.142208166 0.142992331 0.146480743 0.146744949 0.149211883 0.150980488 0.153476593 0.154040066 0.156315483 0.159922143 0.160952788 0.172848518 0.173429632 0.177907707 0.183620372 0.184396463 0.188711728 0.189699465 0.192870654 0.193550219 0.197669596 0.199471362 0.204131208 0.206516805 0.206769817 0.209642686 0.210482601 0.214101689 0.215611813 0.217106011 0.219226120 0.224553864 0.225884989 0.231461015 0.234489144 0.234875538 0.235387874 0.244035062 0.255139524 0.256789615 0.261851079 0.267039255 0.278518671 0.282747766 0.286100815 0.289666504 0.294081502 0.301852100 0.305361101 0.305617953 0.307005919 0.314509597 0.315098055 0.321806231 0.327400749 0.330011437 0.349162528 0.349992001 0.352427837 0.354939572 0.357367863 0.361695893 0.362163768 0.378819831 0.383507667 0.390170918 0.409849076 0.424546228 0.428598838 0.450615592 0.466968442 0.469434154 0.475656418 0.481537718 0.482879757 0.489388756 0.504746150 0.511943086 0.533929182 0.565568361 0.571920623 0.589743399 0.592549914 0.602975187 0.605573995 0.640238072 0.644933461 0.645864287 0.673489565 0.675338127 0.684309103 0.691274235 0.691970089 0.698835698 0.703913737 0.715237654 0.740473798 0.750421796 0.753056814 0.760887227 0.771978649 0.778338365 0.809438396 0.810068401 0.813047715 0.820634648 0.821036200 0.825286099 0.830564502 0.832533452 0.834434650 0.842516571 0.845063334 0.846415843 0.857656873 0.864112491 0.864694961 0.872231163 0.878663434 0.883642856 0.888917613 0.891689652 0.898662341 0.901045051 0.919480356 0.922505675 0.931558213 0.934518216 0.964229016 0.975490261 0.984623673 0.999970856 1.013099601 1.025360076 1.040498856 1.048639065 1.055694313 1.064184427 1.085847702 1.087511480 1.102258296 1.105318217 1.111987966 1.114083279 1.123147274 1.135024115 1.139577222 1.170606530 1.173042033 1.176575212 1.183106059 1.187856625 1.194164510 1.216751136 1.222994637 1.268880332 1.298277685 1.314966780 1.326972721 1.330157501 1.332286703 1.333404904 1.335213035 1.341929144 1.344714302 1.358031547 1.374986342 1.381139685 1.382923580 1.390653689 1.419055543 1.422072057 1.551134739 1.660121601 1.772812776</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">110</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33470649" y3="0.02147714" z3="-0.18614862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37596523" y3="0.16976409" z3="0.42995459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63390764" y3="0.43688882" z3="-0.32872303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.70586728" y3="1.21872807" z3="-2.24344355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37857025" y3="0.39845444" z3="-1.17697333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71284412" y3="0.81694016" z3="-3.6504226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60271475" y3="1.72572651" z3="-3.108463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33779229" y3="2.55596304" z3="-4.5755244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5392109" y3="1.2129319" z3="-4.3581623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45490372" y3="2.88586051" z3="-5.13174388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92999441" y3="-0.51310317" z3="-3.44791728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09500625" y3="-0.01324539" z3="-1.00148889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41020178" y3="-1.15071335" z3="-2.01689228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93725723" y3="-1.03297362" z3="-1.84474663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12056544" y3="-2.47190408" z3="-1.87559996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13685787" y3="-3.59283878" z3="0.65645276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03525185" y3="-5.30745031" z3="-4.73820762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25952516" y3="-5.03279928" z3="-3.70395453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84579779" y3="-4.29855405" z3="-1.09331448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7716833" y3="-4.63339005" z3="-2.85600535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57705168" y3="-5.09193285" z3="-3.24579159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87097726" y3="-4.71873873" z3="-1.93670652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49047664" y3="-4.28187852" z3="-1.53434328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80701356" y3="-4.57904564" z3="-3.2029964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.38074989" y3="-5.40057857" z3="-3.91732256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90745779" y3="-4.73429033" z3="-1.59442687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02841204" y3="-3.83261006" z3="0.22250411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16537703" y3="-3.60839786" z3="0.86951129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05684251" y3="-4.06650711" z3="0.43931545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15752342" y3="-3.4672972" z3="2.33606173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.212881" y3="-3.27037979" z3="5.13341151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35815133" y3="-3.64364749" z3="3.03970998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98412512" y3="-3.20048118" z3="3.05760284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00924846" y3="-3.1025791" z3="4.44588852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38515267" y3="-3.54694746" z3="4.42811272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27774705" y3="-3.86595888" z3="2.49188898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02140996" y3="-3.0924749" z3="2.5535669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07609487" y3="-2.91600394" z3="4.98490643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32714236" y3="-3.69504927" z3="4.96316223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23212291" y3="-3.20153458" z3="6.22466133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41872236" y3="-3.92636462" z3="-0.63456168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18374252" y3="-3.438958" z3="-1.09301214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51135537" y3="0.20052768" z3="-4.71227672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06627046" y3="-1.67846275" z3="0.00870792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.86906083" y3="-0.9177758" z3="1.16111792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.79535325" y3="-0.27573848" z3="1.47450387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.31070489" y3="0.57528997" z3="1.17672774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.36115995" y3="1.44737672" z3="-0.46494301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0174895" y3="-0.69964406" z3="1.39283278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.29180079" y3="1.79420364" z3="2.59888399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.83387229" y3="-0.88756997" z3="2.0698517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.58447267" y3="-0.26760425" z3="3.32075415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.15217411" y3="0.7348464" z3="-1.28103006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.44540733" y3="2.20628957" z3="-0.47811873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.32236021" y3="1.96500861" z3="-0.62985023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01732603" y3="-1.06161929" z3="2.43491008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.00357706" y3="-0.25470615" z3="1.17373536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89252296" y3="-1.54174259" z3="0.69250043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.36603113" y3="1.27552694" z3="3.57106005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.65557785" y3="2.36437785" z3="2.59371472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.11994307" y3="2.52197205" z3="2.5268372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.72502181" y3="-0.73255616" z3="3.82912463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49582053" y3="-0.42407821" z3="3.9119309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.39985388" y3="0.81063116" z3="3.18999315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84536883" y3="-0.74860773" z3="0.99179957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40904706" y3="-2.07116286" z3="0.84137798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75997401" y3="-2.72430673" z3="1.88170923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56533512" y3="-2.04261938" z3="3.07948837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05760175" y3="-0.75746758" z3="3.28694414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70539534" y3="-0.1172912" z3="2.23510856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50277893" y3="-2.55916937" z3="-0.1305608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35458162" y3="-3.72837306" z3="1.74925848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70635407" y3="-2.64622275" z3="4.10330611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8878192" y3="-0.25757336" z3="4.24132279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05700536" y3="0.91066784" z3="2.36000894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81212954" y3="0.41360837" z3="-4.30470292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78518991" y3="-0.55730246" z3="-4.49968348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42375627" y3="-1.74560862" z3="-5.12279631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13035953" y3="-1.96975125" z3="-5.58310775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83520614" y3="-0.99487893" z3="-5.36769589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06823915" y3="1.33362585" z3="-3.77399853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8102924" y3="-0.41788798" z3="-4.15246845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4296933" y3="-2.79856692" z3="-5.27951499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11109819" y3="-2.90764613" z3="-6.08380423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86344163" y3="-1.17309409" z3="-5.69161206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3969748" y3="-1.96254631" z3="5.05997459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31242734" y3="-3.77943239" z3="3.92124128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18973467" y3="-3.70108055" z3="-6.05337956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44361935" y3="-2.71530368" z3="-4.61567505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.04756736" y3="1.17871115" z3="-1.46811163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08235715" y3="1.56237256" z3="-2.44418137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41024923" y3="1.53965294" z3="-1.65668177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81036496" y3="2.23277502" z3="-2.77421613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14016599" y3="1.24688307" z3="-0.89559416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.86274421" y3="2.50268565" z3="-2.91044416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53222146" y3="2.25927061" z3="-3.60063598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.85873842" y3="2.58605725" z3="-3.76077614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80776827" y3="2.5294235" z3="-4.37237508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18277804" y3="3.11790471" z3="-4.66111989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.34720879" y3="3.12861486" z3="-3.27977268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.22545708" y3="3.53594468" z3="-4.06047529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.13471923" y3="4.14233494" z3="-2.66450802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.85777513" y3="5.4747536" z3="-2.86054806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.96692908" y3="3.8568889" z3="-2.01925703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.47755804" y3="6.23380242" z3="-2.37308246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.97496928" y3="4.92116174" z3="-4.25953195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.77569367" y3="5.87367424" z3="-3.68052032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.11969379" y3="5.21417377" z3="-4.8761529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.57227995" y3="6.93566132" z3="-3.83748631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4734473" y3="-2.1430053" z3="-0.29042139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46177458" y3="-2.94838384" z3="-1.04514721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99951509" y3="-2.50390503" z3="0.60834051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0806494" y3="-1.32135334" z3="-0.71567972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17219749" y3="-1.40180457" z3="-1.17355171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30201439" y3="-0.36242401" z3="-1.52883469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.095189" y3="-1.53647357" z3="-0.97827121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42778622" y3="-2.06139896" z3="-2.01632891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3347,.0215,-.1861;7.376,.1698,.43;6.6339,.4369,-.3287;4.7059,1.2187,-2.2434;4.3786,.3985,-1.177;2.7128,.8169,-3.6504;3.6027,1.7257,-3.1085;1.3378,2.556,-4.5755;1.5392,1.2129,-4.3582;.4549,2.8859,-5.1317;2.93,-.5131,-3.4479;3.095,-.0132,-1.0015;2.4102,-1.1507,-2.0169;.9373,-1.033,-1.8447;3.1206,-2.4719,-1.8756;-.1369,-3.5928,.6565;-.0353,-5.3075,-4.7382;-.2595,-5.0328,-3.704;-.8458,-4.2986,-1.0933;.7717,-4.6334,-2.856;-1.5771,-5.0919,-3.2458;-1.871,-4.7187,-1.9367;.4905,-4.2819,-1.5343;1.807,-4.579,-3.203;-2.3807,-5.4006,-3.9173;-2.9075,-4.7343,-1.5944;-1.0284,-3.8326,.2225;-2.1654,-3.6084,.8695;-3.0568,-4.0665,.4393;-2.1575,-3.4673,2.3361;-2.2129,-3.2704,5.1334;-3.3582,-3.6436,3.0397;-.9841,-3.2005,3.0576;-1.0092,-3.1026,4.4459;-3.3852,-3.5469,4.4281;-4.2777,-3.866,2.4919;-.0214,-3.0925,2.5536;-.0761,-2.916,4.9849;-4.3271,-3.695,4.9632;-2.2321,-3.2015,6.2247;1.4187,-3.9264,-.6346;2.1837,-3.439,-1.093;.5114,.2005,-4.7123;-3.0663,-1.6785,.0087;-2.8691,-.9178,1.1611;-1.7954,-.2757,1.4745;-.3107,.5753,1.1767;-.3612,1.4474,-.4649;1.0175,-.6996,1.3928;-.2918,1.7942,2.5989;-3.8339,-.8876,2.0699;-3.5845,-.2676,3.3208;-.1522,.7348,-1.281;.4454,2.2063,-.4781;-1.3224,1.965,-.6299;1.0173,-1.0616,2.4349;2.0036,-.2547,1.1737;.8925,-1.5417,.6925;-.366,1.2755,3.5711;.6556,2.3644,2.5937;-1.1199,2.522,2.5268;-2.725,-.7326,3.8291;-4.4958,-.4241,3.9119;-3.3999,.8106,3.19;4.8454,-.7486,.9918;4.409,-2.0712,.8414;3.76,-2.7243,1.8817;3.5653,-2.0426,3.0795;4.0576,-.7575,3.2869;4.7054,-.1173,2.2351;4.5028,-2.5592,-.1306;3.3546,-3.7284,1.7493;2.7064,-2.6462,4.1033;3.8878,-.2576,4.2413;5.057,.9107,2.36;-.8121,.4136,-4.3047;-1.7852,-.5573,-4.4997;-1.4238,-1.7456,-5.1228;-.1304,-1.9698,-5.5831;.8352,-.9949,-5.3677;-1.0682,1.3336,-3.774;-2.8103,-.4179,-4.1525;-2.4297,-2.7986,-5.2795;.1111,-2.9076,-6.0838;1.8634,-1.1731,-5.6916;2.397,-1.9625,5.06;2.3124,-3.7794,3.9212;-2.1897,-3.7011,-6.0534;-3.4436,-2.7153,-4.6157;7.0476,1.1787,-1.4681;6.0824,1.5624,-2.4442;8.4102,1.5397,-1.6567;8.8104,2.2328,-2.7742;9.1402,1.2469,-.8956;9.8627,2.5027,-2.9104;6.5322,2.2593,-3.6006;7.8587,2.5861,-3.7608;5.8078,2.5294,-4.3724;8.1828,3.1179,-4.6611;3.3472,3.1286,-3.2798;2.2255,3.5359,-4.0605;4.1347,4.1423,-2.6645;3.8578,5.4748,-2.8605;4.9669,3.8569,-2.0193;4.4776,6.2338,-2.3731;1.975,4.9212,-4.2595;2.7757,5.8737,-3.6805;1.1197,5.2142,-4.8762;2.5723,6.9357,-3.8375;-4.4734,-2.143,-.2904;-4.4618,-2.9484,-1.0451;-4.9995,-2.5039,.6083;-5.0806,-1.3214,-.7157;-2.1722,-1.4018,-1.1736;-2.302,-.3624,-1.5288;-1.0952,-1.5365,-.9783;-2.4278,-2.0614,-2.0163;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650341962155</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002789260827 0.000558779877 0.022295117282 0.005337965261</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030451187 -0.001852713 0.000128834 0.000234607 0.000273503 0.000364442 0.000376469 0.000424470 0.000591238 0.000701533 0.000886650 0.001049231 0.001078902 0.001131569 0.001281033 0.001314151 0.001511481 0.001651792 0.001736283 0.001761656 0.001900216 0.002206158 0.002301070 0.002565268 0.002663252 0.003009592 0.003069046 0.003292345 0.003562352 0.003754699 0.004068227 0.004425613 0.004713403 0.004807690 0.005574078 0.005792741 0.005870907 0.006254931 0.006632861 0.007297951 0.007568697 0.007896779 0.008494007 0.009060920 0.009466701 0.010098321 0.010211460 0.011113000 0.011256944 0.011791193 0.012603547 0.012883287 0.013460940 0.013632835 0.014539758 0.015098562 0.015298478 0.015477894 0.015824546 0.016435166 0.016782411 0.017249317 0.018271184 0.018700865 0.019208829 0.020159444 0.021022642 0.021133820 0.022069833 0.022929717 0.024085037 0.024676566 0.025532563 0.026256766 0.026591977 0.028122315 0.029051148 0.030009583 0.031626992 0.031858838 0.033110626 0.033763582 0.035046788 0.035745893 0.038037660 0.038552851 0.039851503 0.040251182 0.041163150 0.044082347 0.044580800 0.044905838 0.046712414 0.049081152 0.049971487 0.050247134 0.050715400 0.051131450 0.052352304 0.052415166 0.052696035 0.052808758 0.054083975 0.054328961 0.055209988 0.055417754 0.056364557 0.056433013 0.056857214 0.057796538 0.059507632 0.060314581 0.061213431 0.061286035 0.062479727 0.063009833 0.063618398 0.064719229 0.064990889 0.066064475 0.067348270 0.068347086 0.071232934 0.072292926 0.073912365 0.075577321 0.077143588 0.082974428 0.084455738 0.086154873 0.086749789 0.087251257 0.089810334 0.090163717 0.092669437 0.094265005 0.094555459 0.096066453 0.096657996 0.097487241 0.098279313 0.099332850 0.099983515 0.101374804 0.101722384 0.102623430 0.103019132 0.103710855 0.103893608 0.105847495 0.106524422 0.106904850 0.108720153 0.109559248 0.110073856 0.111871685 0.112458203 0.114278162 0.115932641 0.118489019 0.120001274 0.120792770 0.121635449 0.123254832 0.124985822 0.126050425 0.126729011 0.131260114 0.134491205 0.135350491 0.142208967 0.142993890 0.146538320 0.146748551 0.149247577 0.151003934 0.153477297 0.154064125 0.156316545 0.159924447 0.160999801 0.172868865 0.173489973 0.177949137 0.183632329 0.184453530 0.188716179 0.189704252 0.192871656 0.193557416 0.197695305 0.199478556 0.204132326 0.206546008 0.206771292 0.209644181 0.210484288 0.214103040 0.215631427 0.217105462 0.219289490 0.224558520 0.225889573 0.231460927 0.234493876 0.234886627 0.235408623 0.244076950 0.255154568 0.256791846 0.261942049 0.267072943 0.278520128 0.282747731 0.286100804 0.289666511 0.294132165 0.302108366 0.305374274 0.305718731 0.307067157 0.314579547 0.315235729 0.321806536 0.327403807 0.330030083 0.349166689 0.350239713 0.352571482 0.354939695 0.357595403 0.361712018 0.362184828 0.378893355 0.383513491 0.390281535 0.409904020 0.424554780 0.428609700 0.450632100 0.467004409 0.469582134 0.475656823 0.481538248 0.483007151 0.489403856 0.504746330 0.512023369 0.533938077 0.565571133 0.571950484 0.589832060 0.592593654 0.603103302 0.605770338 0.640427659 0.645002756 0.645929995 0.673491137 0.675392654 0.684321669 0.691274268 0.691971476 0.698857895 0.703914851 0.715245978 0.740474370 0.750570190 0.753367817 0.760890406 0.772002464 0.778353352 0.809602751 0.810079793 0.813048539 0.820661325 0.821036893 0.825331128 0.830602582 0.832584787 0.834802080 0.842709492 0.845069574 0.846427094 0.857657047 0.864157013 0.864704119 0.872257488 0.878685622 0.883664243 0.888925338 0.891692453 0.898665828 0.901067002 0.919592732 0.922556608 0.931691287 0.934518197 0.964229588 0.975492242 0.984688001 1.000085631 1.013420938 1.025390266 1.040525803 1.048645725 1.055716244 1.064418460 1.085907233 1.087629724 1.102261348 1.105339732 1.112009185 1.114085841 1.123158200 1.135024561 1.139591282 1.170618676 1.173110528 1.177058256 1.183136668 1.187861410 1.194184934 1.216762524 1.223533884 1.268945915 1.298283001 1.315356677 1.327016418 1.330184251 1.332321796 1.333405930 1.335268939 1.341932119 1.344715116 1.358041556 1.374989473 1.381150957 1.382923846 1.390756269 1.419096227 1.422073419 1.551139860 1.660139728 1.772932571</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">111</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33696987" y3="0.02187347" z3="-0.18737876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37986766" y3="0.17003205" z3="0.42756226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63753851" y3="0.43947199" z3="-0.3298929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7087499" y3="1.22099223" z3="-2.24443878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38058893" y3="0.39992931" z3="-1.17768277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71415893" y3="0.8193282" z3="-3.65024616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60586079" y3="1.7276075" z3="-3.10982586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34316553" y3="2.5586833" z3="-4.57921934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54099954" y3="1.21721173" z3="-4.35755151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46002907" y3="2.89027006" z3="-5.134101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92900879" y3="-0.51119443" z3="-3.44677571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09616887" y3="-0.01013548" z3="-1.00071731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40956113" y3="-1.14735043" z3="-2.01462657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93685801" y3="-1.02906287" z3="-1.8408325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11950633" y3="-2.46878935" z3="-1.87310416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13663952" y3="-3.59324186" z3="0.65623095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03014826" y3="-5.30526533" z3="-4.73903656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25510415" y3="-5.03183324" z3="-3.70461906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84389913" y3="-4.29937101" z3="-1.09386519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77532416" y3="-4.63186746" z3="-2.85588487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5728934" y3="-5.09277371" z3="-3.24709803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86787259" y3="-4.72089807" z3="-1.93787653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49277559" y3="-4.28103081" z3="-1.53419911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80933658" y3="-4.57303131" z3="-3.20167557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37739915" y3="-5.39999342" z3="-3.91947205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90598993" y3="-4.73525044" z3="-1.59590012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02784268" y3="-3.8339917" z3="0.22205192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16493245" y3="-3.61280179" z3="0.8695159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05624561" y3="-4.07143013" z3="0.4386199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15750364" y3="-3.47215585" z3="2.33594794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21289063" y3="-3.27754585" z3="5.13328857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35687064" y3="-3.65455939" z3="3.03980522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98560654" y3="-3.19971178" z3="3.05709414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01053101" y3="-3.10331078" z3="4.44545847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38385614" y3="-3.55895303" z3="4.42826522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27585196" y3="-3.88029622" z3="2.49209391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02341302" y3="-3.08693096" z3="2.55242061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07778517" y3="-2.91332762" z3="4.98432764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32505951" y3="-3.71134048" z3="4.96358483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23193796" y3="-3.21002766" z3="6.22461867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42034434" y3="-3.92485539" z3="-0.63374082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18320026" y3="-3.4346158" z3="-1.09114848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51186153" y3="0.20581923" z3="-4.71007878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06912216" y3="-1.68237718" z3="0.01008453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.875574" y3="-0.92368048" z3="1.1628877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80725857" y3="-0.2782483" z3="1.47931922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.31854039" y3="0.57418293" z3="1.18051448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.37025903" y3="1.4474135" z3="-0.46101956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01488696" y3="-0.69572088" z3="1.39630136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.30461825" y3="1.79377408" z3="2.60294803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8409578" y3="-0.89774659" z3="2.07065194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59054715" y3="-0.27797754" z3="3.32280173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.15961612" y3="0.73652786" z3="-1.27824742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.42953156" y3="2.21001172" z3="-0.47219236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.33370737" y3="1.96288543" z3="-0.62555508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01834988" y3="-1.05504344" z3="2.43864547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.99637643" y3="-0.24512001" z3="1.1746717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89387345" y3="-1.5384601" z3="0.69690305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.37727043" y3="1.27431714" z3="3.57495699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.63878637" y3="2.36910313" z3="2.59893326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.13662277" y3="2.51641293" z3="2.53108843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.72878245" y3="-0.74250707" z3="3.82904527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5015276" y3="-0.43505033" z3="3.91651403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.40588891" y3="0.80121729" z3="3.19343149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84665465" y3="-0.74677797" z3="0.99141316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41025511" y3="-2.06935998" z3="0.84319434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76038471" y3="-2.72044109" z3="1.88427599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56489159" y3="-2.03664681" z3="3.08059786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05666358" y3="-0.75113296" z3="3.28565384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70547752" y3="-0.1130787" z3="2.23324425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50477761" y3="-2.55905721" z3="-0.12762467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35504495" y3="-3.72458217" z3="1.75345902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70460622" y3="-2.63842221" z3="4.10438083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88547256" y3="-0.24922214" z3="4.23831511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05680671" y3="0.9150409" z3="2.35640193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81157645" y3="0.42009168" z3="-4.30151357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78599458" y3="-0.55000307" z3="-4.49491682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42634201" y3="-1.73921191" z3="-5.11820909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13303971" y3="-1.96438153" z3="-5.58041115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83404099" y3="-0.99055733" z3="-5.36667522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06658711" y3="1.34112101" z3="-3.77065283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80866884" y3="-0.40698237" z3="-4.14752337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43295585" y3="-2.79078467" z3="-5.27110104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10659589" y3="-2.90307762" z3="-6.08005881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85881949" y3="-1.1738331" z3="-5.68937669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.39256772" y3="-1.95216693" z3="5.05832133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31151307" y3="-3.77267913" z3="3.92409315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19638142" y3="-3.69295334" z3="-6.04528277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44444672" y3="-2.70741371" z3="-4.60289223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05204481" y3="1.18250561" z3="-1.4694129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08677555" y3="1.5662728" z3="-2.44542057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41490393" y3="1.53675538" z3="-1.66038418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81493929" y3="2.22108964" z3="-2.78062808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14442262" y3="1.24046817" z3="-0.90044747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.86651379" y3="2.48039054" z3="-2.91999639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53722581" y3="2.25830384" z3="-3.60364785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86315985" y3="2.57528661" z3="-3.76679542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81247657" y3="2.52656982" z3="-4.37600725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18699638" y3="3.09913946" z3="-4.66936857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35344579" y3="3.13067604" z3="-3.28396035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23301572" y3="3.53814598" z3="-4.06609482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.14299938" y3="4.14451895" z3="-2.6706131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.86962892" y3="5.47664935" z3="-2.87017265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.9758541" y3="3.8579106" z3="-2.02650811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.49297333" y3="6.23361939" z3="-2.386879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.98435945" y3="4.92453528" z3="-4.26626891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.78722224" y3="5.87714446" z3="-3.68912031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.12857238" y3="5.21909356" z3="-4.88167628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.58362349" y3="6.94100979" z3="-3.8457355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47421749" y3="-2.14990136" z3="-0.29157816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45813423" y3="-2.95169628" z3="-1.04826423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99989048" y3="-2.51602971" z3="0.60402224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08391841" y3="-1.32946861" z3="-0.71546858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17504186" y3="-1.40388559" z3="-1.17183318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30569344" y3="-0.36481782" z3="-1.52618657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09736212" y3="-1.53841701" z3="-0.97769782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43192461" y3="-2.06287952" z3="-2.01558969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.337,.0219,-.1874;7.3799,.17,.4276;6.6375,.4395,-.3299;4.7087,1.221,-2.2444;4.3806,.3999,-1.1777;2.7142,.8193,-3.6502;3.6059,1.7276,-3.1098;1.3432,2.5587,-4.5792;1.541,1.2172,-4.3576;.46,2.8903,-5.1341;2.929,-.5112,-3.4468;3.0962,-.0101,-1.0007;2.4096,-1.1474,-2.0146;.9369,-1.0291,-1.8408;3.1195,-2.4688,-1.8731;-.1366,-3.5932,.6562;-.0301,-5.3053,-4.739;-.2551,-5.0318,-3.7046;-.8439,-4.2994,-1.0939;.7753,-4.6319,-2.8559;-1.5729,-5.0928,-3.2471;-1.8679,-4.7209,-1.9379;.4928,-4.281,-1.5342;1.8093,-4.573,-3.2017;-2.3774,-5.4,-3.9195;-2.906,-4.7353,-1.5959;-1.0278,-3.834,.2221;-2.1649,-3.6128,.8695;-3.0562,-4.0714,.4386;-2.1575,-3.4722,2.3359;-2.2129,-3.2775,5.1333;-3.3569,-3.6546,3.0398;-.9856,-3.1997,3.0571;-1.0105,-3.1033,4.4455;-3.3839,-3.559,4.4283;-4.2759,-3.8803,2.4921;-.0234,-3.0869,2.5524;-.0778,-2.9133,4.9843;-4.3251,-3.7113,4.9636;-2.2319,-3.21,6.2246;1.4203,-3.9249,-.6337;2.1832,-3.4346,-1.0911;.5119,.2058,-4.7101;-3.0691,-1.6824,.0101;-2.8756,-.9237,1.1629;-1.8073,-.2782,1.4793;-.3185,.5742,1.1805;-.3703,1.4474,-.461;1.0149,-.6957,1.3963;-.3046,1.7938,2.6029;-3.841,-.8977,2.0707;-3.5905,-.278,3.3228;-.1596,.7365,-1.2782;.4295,2.21,-.4722;-1.3337,1.9629,-.6256;1.0183,-1.055,2.4386;1.9964,-.2451,1.1747;.8939,-1.5385,.6969;-.3773,1.2743,3.575;.6388,2.3691,2.5989;-1.1366,2.5164,2.5311;-2.7288,-.7425,3.829;-4.5015,-.4351,3.9165;-3.4059,.8012,3.1934;4.8467,-.7468,.9914;4.4103,-2.0694,.8432;3.7604,-2.7204,1.8843;3.5649,-2.0366,3.0806;4.0567,-.7511,3.2857;4.7055,-.1131,2.2332;4.5048,-2.5591,-.1276;3.355,-3.7246,1.7535;2.7046,-2.6384,4.1044;3.8855,-.2492,4.2383;5.0568,.915,2.3564;-.8116,.4201,-4.3015;-1.786,-.55,-4.4949;-1.4263,-1.7392,-5.1182;-.133,-1.9644,-5.5804;.834,-.9906,-5.3667;-1.0666,1.3411,-3.7707;-2.8087,-.407,-4.1475;-2.433,-2.7908,-5.2711;.1066,-2.9031,-6.0801;1.8588,-1.1738,-5.6894;2.3926,-1.9522,5.0583;2.3115,-3.7727,3.9241;-2.1964,-3.693,-6.0453;-3.4444,-2.7074,-4.6029;7.052,1.1825,-1.4694;6.0868,1.5663,-2.4454;8.4149,1.5368,-1.6604;8.8149,2.2211,-2.7806;9.1444,1.2405,-.9004;9.8665,2.4804,-2.92;6.5372,2.2583,-3.6036;7.8632,2.5753,-3.7668;5.8125,2.5266,-4.376;8.187,3.0991,-4.6694;3.3534,3.1307,-3.284;2.233,3.5381,-4.0661;4.143,4.1445,-2.6706;3.8696,5.4766,-2.8702;4.9759,3.8579,-2.0265;4.493,6.2336,-2.3869;1.9844,4.9245,-4.2663;2.7872,5.8771,-3.6891;1.1286,5.2191,-4.8817;2.5836,6.941,-3.8457;-4.4742,-2.1499,-.2916;-4.4581,-2.9517,-1.0483;-4.9999,-2.516,.604;-5.0839,-1.3295,-.7155;-2.175,-1.4039,-1.1718;-2.3057,-.3648,-1.5262;-1.0974,-1.5384,-.9777;-2.4319,-2.0629,-2.0156;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650358698265</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002816990270 0.000514406432 0.018356400062 0.005337649899</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030452333 -0.001553999 0.000131041 0.000234874 0.000273600 0.000367038 0.000377688 0.000425128 0.000591390 0.000702301 0.000887245 0.001053366 0.001079010 0.001131467 0.001282945 0.001314490 0.001515316 0.001659878 0.001739563 0.001761796 0.001900203 0.002211247 0.002303184 0.002565375 0.002667940 0.003017821 0.003070169 0.003296551 0.003565932 0.003759970 0.004073188 0.004427515 0.004719667 0.004809800 0.005577579 0.005793622 0.005874903 0.006254719 0.006633722 0.007359970 0.007612097 0.007897116 0.008494550 0.009061927 0.009553908 0.010202038 0.010269216 0.011113149 0.011272761 0.011791074 0.012617797 0.012941765 0.013460860 0.013681747 0.014540304 0.015100549 0.015298496 0.015480752 0.015828133 0.016466455 0.016787784 0.017249401 0.018272405 0.018701084 0.019209962 0.020161753 0.021034388 0.021139731 0.022083265 0.022946944 0.024279584 0.024695266 0.025546873 0.026291375 0.026592962 0.028155718 0.029050895 0.030230149 0.031628329 0.031901563 0.033134973 0.033819493 0.035088199 0.035774042 0.038038910 0.038558808 0.039853378 0.040254406 0.041213675 0.044091779 0.044592611 0.044906717 0.046713650 0.049086577 0.049976093 0.050321831 0.050719246 0.051131486 0.052354371 0.052424490 0.052705268 0.052808854 0.054084041 0.054338152 0.055213928 0.055416514 0.056366818 0.056433306 0.056857895 0.057805308 0.059534522 0.060317931 0.061221425 0.061299412 0.062485429 0.063009861 0.063690041 0.064723686 0.064991198 0.066084467 0.067353226 0.068349717 0.071290080 0.072295797 0.073921280 0.075580764 0.077148168 0.082993704 0.084488429 0.086198924 0.086752302 0.087252035 0.089832401 0.090191727 0.092671936 0.094283048 0.094555597 0.096073295 0.096666679 0.097488059 0.098286250 0.099336919 0.099986952 0.101407346 0.101775550 0.102642221 0.103019210 0.103715669 0.103894065 0.105861312 0.106542838 0.106932821 0.108722378 0.109582588 0.110160231 0.111882021 0.112489130 0.114284529 0.115934596 0.118489209 0.120006720 0.120793588 0.121636620 0.123254158 0.124988915 0.126052890 0.126729158 0.131270327 0.134499198 0.135352927 0.142213837 0.142994155 0.146572284 0.146761188 0.149271126 0.151009392 0.153478481 0.154083818 0.156320050 0.159924843 0.161084902 0.172887131 0.173542313 0.177973505 0.183646439 0.184504272 0.188716054 0.189711705 0.192872664 0.193565334 0.197710117 0.199489666 0.204145380 0.206570317 0.206772478 0.209644637 0.210484434 0.214104687 0.215649390 0.217111319 0.219343190 0.224561693 0.225890528 0.231463559 0.234493692 0.234890183 0.235412086 0.244130133 0.255164423 0.256791943 0.261992864 0.267113391 0.278527255 0.282748257 0.286101650 0.289671769 0.294209166 0.302502484 0.305385233 0.305790863 0.307148153 0.314630127 0.315452619 0.321808091 0.327411404 0.330056297 0.349172354 0.350426894 0.352704530 0.354943097 0.357782242 0.361713992 0.362201003 0.378968979 0.383528426 0.390438983 0.409947532 0.424598980 0.428687401 0.450641229 0.467009114 0.469661429 0.475662279 0.481538769 0.483230689 0.489403568 0.504751302 0.512221639 0.533941937 0.565573642 0.571950504 0.589914512 0.592613876 0.603140625 0.605898969 0.640465013 0.645035620 0.646017557 0.673491130 0.675412865 0.684321786 0.691274471 0.691972708 0.698877894 0.703918002 0.715258612 0.740485668 0.750649080 0.753524167 0.760898967 0.772012055 0.778359133 0.809754385 0.810097625 0.813052056 0.820668940 0.821037185 0.825349802 0.830616189 0.832629753 0.835105841 0.843111544 0.845080790 0.846458189 0.857658989 0.864178429 0.864719376 0.872301374 0.878691810 0.883671599 0.888925402 0.891694840 0.898672203 0.901085220 0.919678400 0.922649734 0.931748199 0.934519324 0.964229772 0.975492454 0.984756006 1.000206003 1.013584831 1.025400465 1.040536665 1.048659614 1.055742332 1.064595602 1.085948213 1.087723631 1.102261474 1.105351784 1.112037543 1.114086016 1.123165595 1.135025238 1.139597489 1.170632385 1.173184827 1.177690075 1.183276152 1.187863427 1.194217757 1.216772662 1.223990551 1.268993535 1.298351547 1.315819858 1.327091277 1.330192370 1.332364698 1.333464764 1.335272623 1.341932911 1.344719173 1.358042857 1.374990649 1.381212226 1.382924445 1.390819842 1.419122971 1.422073431 1.551142069 1.660175213 1.772990585</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">112</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33868552" y3="0.02586363" z3="-0.18743901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38181336" y3="0.16686942" z3="0.4253519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63938551" y3="0.43507765" z3="-0.33280863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7116756" y3="1.22072999" z3="-2.2465686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38242399" y3="0.40434256" z3="-1.17768142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71544791" y3="0.82252297" z3="-3.6501009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60954434" y3="1.72944674" z3="-3.11198248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34653772" y3="2.56398142" z3="-4.57978341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5425491" y3="1.22148033" z3="-4.35735718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46410533" y3="2.89581009" z3="-5.13566625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92808637" y3="-0.50804748" z3="-3.44499578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09738546" y3="-0.00326632" z3="-0.99976879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40928781" y3="-1.14183928" z3="-2.0117082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93675058" y3="-1.02247735" z3="-1.83703845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11835532" y3="-2.46371746" z3="-1.86970349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13631612" y3="-3.59499948" z3="0.65662797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02640906" y3="-5.30101294" z3="-4.739926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25234296" y3="-5.02845501" z3="-3.70547472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8424537" y3="-4.30016339" z3="-1.09423001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77734339" y3="-4.62781106" z3="-2.85602035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5701926" y3="-5.09174045" z3="-3.24864631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86626579" y3="-4.72129289" z3="-1.93923947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49452102" y3="-4.27973885" z3="-1.53387519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81253532" y3="-4.56925179" z3="-3.20171066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37256848" y3="-5.40094866" z3="-3.92150698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9041526" y3="-4.7376217" z3="-1.59783752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02719684" y3="-3.83648882" z3="0.22208197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16501052" y3="-3.61696684" z3="0.86917445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05517228" y3="-4.07756326" z3="0.43854653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15748971" y3="-3.47726391" z3="2.33583643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.212832" y3="-3.28426167" z3="5.13338216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35657247" y3="-3.66334377" z3="3.03993753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98575672" y3="-3.20165584" z3="3.05690587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01089171" y3="-3.1058125" z3="4.44527869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38345131" y3="-3.56879441" z3="4.42849302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27524407" y3="-3.89151194" z3="2.49235388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02410503" y3="-3.08462755" z3="2.55207937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07885262" y3="-2.9122822" z3="4.98390627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32399116" y3="-3.72486804" z3="4.96397824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23198229" y3="-3.21721877" z3="6.22471755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42164598" y3="-3.923813" z3="-0.63251048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18362141" y3="-3.43131457" z3="-1.08910953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51146467" y3="0.21129529" z3="-4.70789597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07146104" y3="-1.68897962" z3="0.00959562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87808903" y3="-0.93118205" z3="1.16419159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80689668" y3="-0.28751566" z3="1.48077948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.32745459" y3="0.57483212" z3="1.18481781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.38233335" y3="1.44862317" z3="-0.45616351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01138627" y3="-0.68947944" z3="1.39881057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.31947384" y3="1.79221911" z3="2.6085257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84372303" y3="-0.90630598" z3="2.07203952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.5971943" y3="-0.288012" z3="3.32435838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16677305" y3="0.73874963" z3="-1.27249694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.41763904" y3="2.21352991" z3="-0.46718012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.34693094" y3="1.95873817" z3="-0.62209903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01808939" y3="-1.04900926" z3="2.44142225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9924405" y3="-0.23691425" z3="1.17486773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89062044" y3="-1.53373815" z3="0.70037035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38884632" y3="1.27169577" z3="3.58003001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.62184164" y3="2.37177459" z3="2.60434428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.15465292" y3="2.51172721" z3="2.53755013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73723894" y3="-0.75274243" z3="3.8324618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5091662" y3="-0.44708536" z3="3.9141973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.41349305" y3="0.79138354" z3="3.19623561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84743054" y3="-0.74163672" z3="0.99172602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41101383" y3="-2.06459287" z3="0.84380925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7603888" y3="-2.71505237" z3="1.8849631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56358889" y3="-2.03010654" z3="3.08056727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05532526" y3="-0.74427803" z3="3.28540409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70539999" y3="-0.10707652" z3="2.23322745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50590074" y3="-2.55510478" z3="-0.12684041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35558965" y3="-3.71958868" z3="1.75492153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70284977" y3="-2.63109914" z3="4.10437923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88378395" y3="-0.24156731" z3="4.23803617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05714162" y3="0.92112903" z3="2.35597719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81118163" y3="0.42744972" z3="-4.29819133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78649468" y3="-0.54220378" z3="-4.4892536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42826113" y3="-1.73243743" z3="-5.1111401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13590588" y3="-1.95932225" z3="-5.57421735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83187333" y3="-0.98594214" z3="-5.36236526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06493826" y3="1.34917368" z3="-3.76806694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81045483" y3="-0.39977199" z3="-4.14099221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43592033" y3="-2.78486861" z3="-5.26324453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.1023928" y3="-2.89861258" z3="-6.07354862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85846668" y3="-1.16752897" z3="-5.68772828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3834496" y3="-1.94200376" z3="5.05310104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31758107" y3="-3.76767722" z3="3.93012719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20092535" y3="-3.68644187" z3="-6.03939657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44628306" y3="-2.70224382" z3="-4.59329803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05437173" y3="1.17201316" z3="-1.47455291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08920798" y3="1.55702488" z3="-2.45024376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.41853865" y3="1.52653073" z3="-1.66608541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81987097" y3="2.21309079" z3="-2.78665557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14879727" y3="1.233851" z3="-0.90504624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87341416" y3="2.47773463" z3="-2.92532762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54040247" y3="2.24767599" z3="-3.60959496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86811878" y3="2.5669823" z3="-3.77296252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81610417" y3="2.51892264" z3="-4.38106656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19299718" y3="3.09333649" z3="-4.67579854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35975586" y3="3.1329105" z3="-3.28819241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23903877" y3="3.54210717" z3="-4.06939394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.15272791" y3="4.14566732" z3="-2.67817374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88257443" y3="5.47823357" z3="-2.88044758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.98503411" y3="3.8584848" z3="-2.03370126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.50784915" y3="6.23555379" z3="-2.39874089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99457918" y3="4.92787167" z3="-4.273587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.80072836" y3="5.87924137" z3="-3.69984539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.13916558" y3="5.22303173" z3="-4.88918767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.60197989" y3="6.94184034" z3="-3.86084347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47659047" y3="-2.15767442" z3="-0.29222967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46198708" y3="-2.95986273" z3="-1.05082094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00123973" y3="-2.52451076" z3="0.60515874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08738039" y3="-1.33675684" z3="-0.71389473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17691679" y3="-1.40689613" z3="-1.17079397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30802801" y3="-0.36638083" z3="-1.52245801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10018979" y3="-1.53980828" z3="-0.97426072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43027805" y3="-2.06370132" z3="-2.01597337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3387,.0259,-.1874;7.3818,.1669,.4254;6.6394,.4351,-.3328;4.7117,1.2207,-2.2466;4.3824,.4043,-1.1777;2.7154,.8225,-3.6501;3.6095,1.7294,-3.112;1.3465,2.564,-4.5798;1.5425,1.2215,-4.3574;.4641,2.8958,-5.1357;2.9281,-.508,-3.445;3.0974,-.0033,-.9998;2.4093,-1.1418,-2.0117;.9368,-1.0225,-1.837;3.1184,-2.4637,-1.8697;-.1363,-3.595,.6566;-.0264,-5.301,-4.7399;-.2523,-5.0285,-3.7055;-.8425,-4.3002,-1.0942;.7773,-4.6278,-2.856;-1.5702,-5.0917,-3.2486;-1.8663,-4.7213,-1.9392;.4945,-4.2797,-1.5339;1.8125,-4.5693,-3.2017;-2.3726,-5.4009,-3.9215;-2.9042,-4.7376,-1.5978;-1.0272,-3.8365,.2221;-2.165,-3.617,.8692;-3.0552,-4.0776,.4385;-2.1575,-3.4773,2.3358;-2.2128,-3.2843,5.1334;-3.3566,-3.6633,3.0399;-.9858,-3.2017,3.0569;-1.0109,-3.1058,4.4453;-3.3835,-3.5688,4.4285;-4.2752,-3.8915,2.4924;-.0241,-3.0846,2.5521;-.0789,-2.9123,4.9839;-4.324,-3.7249,4.964;-2.232,-3.2172,6.2247;1.4216,-3.9238,-.6325;2.1836,-3.4313,-1.0891;.5115,.2113,-4.7079;-3.0715,-1.689,.0096;-2.8781,-.9312,1.1642;-1.8069,-.2875,1.4808;-.3275,.5748,1.1848;-.3823,1.4486,-.4562;1.0114,-.6895,1.3988;-.3195,1.7922,2.6085;-3.8437,-.9063,2.072;-3.5972,-.288,3.3244;-.1668,.7387,-1.2725;.4176,2.2135,-.4672;-1.3469,1.9587,-.6221;1.0181,-1.049,2.4414;1.9924,-.2369,1.1749;.8906,-1.5337,.7004;-.3888,1.2717,3.58;.6218,2.3718,2.6043;-1.1547,2.5117,2.5376;-2.7372,-.7527,3.8325;-4.5092,-.4471,3.9142;-3.4135,.7914,3.1962;4.8474,-.7416,.9917;4.411,-2.0646,.8438;3.7604,-2.7151,1.885;3.5636,-2.0301,3.0806;4.0553,-.7443,3.2854;4.7054,-.1071,2.2332;4.5059,-2.5551,-.1268;3.3556,-3.7196,1.7549;2.7028,-2.6311,4.1044;3.8838,-.2416,4.238;5.0571,.9211,2.356;-.8112,.4274,-4.2982;-1.7865,-.5422,-4.4893;-1.4283,-1.7324,-5.1111;-.1359,-1.9593,-5.5742;.8319,-.9859,-5.3624;-1.0649,1.3492,-3.7681;-2.8105,-.3998,-4.141;-2.4359,-2.7849,-5.2632;.1024,-2.8986,-6.0735;1.8585,-1.1675,-5.6877;2.3834,-1.942,5.0531;2.3176,-3.7677,3.9301;-2.2009,-3.6864,-6.0394;-3.4463,-2.7022,-4.5933;7.0544,1.172,-1.4746;6.0892,1.557,-2.4502;8.4185,1.5265,-1.6661;8.8199,2.2131,-2.7867;9.1488,1.2339,-.905;9.8734,2.4777,-2.9253;6.5404,2.2477,-3.6096;7.8681,2.567,-3.773;5.8161,2.5189,-4.3811;8.193,3.0933,-4.6758;3.3598,3.1329,-3.2882;2.239,3.5421,-4.0694;4.1527,4.1457,-2.6782;3.8826,5.4782,-2.8804;4.985,3.8585,-2.0337;4.5078,6.2356,-2.3987;1.9946,4.9279,-4.2736;2.8007,5.8792,-3.6998;1.1392,5.223,-4.8892;2.602,6.9418,-3.8608;-4.4766,-2.1577,-.2922;-4.462,-2.9599,-1.0508;-5.0012,-2.5245,.6052;-5.0874,-1.3368,-.7139;-2.1769,-1.4069,-1.1708;-2.308,-.3664,-1.5225;-1.1002,-1.5398,-.9743;-2.4303,-2.0637,-2.016;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650376405207</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002377941779 0.000442437631 0.020815793770 0.005339605912</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030452894 -0.001114475 0.000132701 0.000234848 0.000273833 0.000369492 0.000379046 0.000427847 0.000592069 0.000703030 0.000889657 0.001054358 0.001079997 0.001134283 0.001289907 0.001315717 0.001519269 0.001670713 0.001741110 0.001762326 0.001901995 0.002218912 0.002306472 0.002566192 0.002668542 0.003020951 0.003070880 0.003298288 0.003576851 0.003767060 0.004077267 0.004427819 0.004724940 0.004809769 0.005578422 0.005793845 0.005876717 0.006255025 0.006634176 0.007366056 0.007632848 0.007897113 0.008496943 0.009064486 0.009572101 0.010213650 0.010478042 0.011113721 0.011289674 0.011791014 0.012620681 0.012992945 0.013461889 0.013710197 0.014541046 0.015100595 0.015299546 0.015482472 0.015834285 0.016509633 0.016787314 0.017250041 0.018272528 0.018702719 0.019212093 0.020162276 0.021044874 0.021142477 0.022084943 0.022954510 0.024323024 0.024710900 0.025560249 0.026314096 0.026593213 0.028208547 0.029052085 0.030434018 0.031635046 0.031926938 0.033153830 0.033842283 0.035119488 0.035802135 0.038039798 0.038570569 0.039854255 0.040254916 0.041236567 0.044099727 0.044610541 0.044907908 0.046713651 0.049091491 0.049983141 0.050396320 0.050726898 0.051131745 0.052356954 0.052429554 0.052708147 0.052809278 0.054084157 0.054340545 0.055217439 0.055427669 0.056367155 0.056435396 0.056859061 0.057832917 0.059549937 0.060317659 0.061225853 0.061313636 0.062501335 0.063009867 0.063735719 0.064723326 0.064991271 0.066103839 0.067353452 0.068351721 0.071311723 0.072296303 0.073931510 0.075593418 0.077149599 0.083019142 0.084513699 0.086207973 0.086752339 0.087252908 0.089843764 0.090197112 0.092678690 0.094306167 0.094555975 0.096073776 0.096666603 0.097489684 0.098287098 0.099339975 0.099991792 0.101432207 0.101819788 0.102650333 0.103019932 0.103732963 0.103894345 0.105868720 0.106549909 0.106942594 0.108724459 0.109599641 0.110237916 0.111892862 0.112514957 0.114291241 0.115938223 0.118490534 0.120007823 0.120794320 0.121638696 0.123264023 0.124988903 0.126054175 0.126735466 0.131270461 0.134526402 0.135354038 0.142221061 0.142994353 0.146581308 0.146768069 0.149287213 0.151009978 0.153498734 0.154107446 0.156324681 0.159930682 0.161169133 0.172900707 0.173569615 0.177974418 0.183656374 0.184532746 0.188722340 0.189716074 0.192873915 0.193569257 0.197716367 0.199496389 0.204167289 0.206575775 0.206772829 0.209644616 0.210488615 0.214108779 0.215660100 0.217119423 0.219384259 0.224561709 0.225890766 0.231471433 0.234497545 0.234890711 0.235412481 0.244177506 0.255168632 0.256792178 0.262004709 0.267132793 0.278540482 0.282749159 0.286104450 0.289677116 0.294284985 0.302834213 0.305390134 0.305834980 0.307211522 0.314662722 0.315620042 0.321809172 0.327428893 0.330082037 0.349179089 0.350516260 0.352797577 0.354945325 0.357886406 0.361715969 0.362207820 0.379022365 0.383544539 0.390557560 0.409963839 0.424668026 0.428783611 0.450642168 0.467009466 0.469675670 0.475673137 0.481539457 0.483422243 0.489410273 0.504769994 0.512462942 0.533972871 0.565584337 0.571964991 0.589936884 0.592614343 0.603140800 0.605946577 0.640466094 0.645045553 0.646094933 0.673492170 0.675418460 0.684325430 0.691275662 0.691985273 0.698888387 0.703923635 0.715273325 0.740511364 0.750695578 0.753584189 0.760899243 0.772012138 0.778360839 0.809865794 0.810121631 0.813058889 0.820672061 0.821037221 0.825354065 0.830622380 0.832661255 0.835297117 0.843473142 0.845095412 0.846500141 0.857663032 0.864179371 0.864734146 0.872347681 0.878691809 0.883672072 0.888927601 0.891697475 0.898697538 0.901112455 0.919730178 0.922752144 0.931756230 0.934520902 0.964229848 0.975498214 0.984811593 1.000286440 1.013610518 1.025400683 1.040537914 1.048681397 1.055771295 1.064667013 1.085966646 1.087764253 1.102265795 1.105352633 1.112054780 1.114092732 1.123167178 1.135026010 1.139598580 1.170642117 1.173248840 1.178194862 1.183474483 1.187868534 1.194247474 1.216774839 1.224231617 1.269238967 1.298447536 1.316222332 1.327157017 1.330280219 1.332382790 1.333558003 1.335279569 1.341933288 1.344730181 1.358042945 1.374991380 1.381336974 1.382924687 1.390852140 1.419136230 1.422077691 1.551142298 1.660220738 1.773000516</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">113</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34034897" y3="0.02545597" z3="-0.18900494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38459712" y3="0.16423919" z3="0.42217052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6425128" y3="0.43561153" z3="-0.33471321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71446306" y3="1.22234149" z3="-2.24803981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38433609" y3="0.4059082" z3="-1.17855603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71676262" y3="0.82518791" z3="-3.65022963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6127676" y3="1.73140159" z3="-3.11360564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35206594" y3="2.56694767" z3="-4.58418899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54478455" y3="1.22508302" z3="-4.35848339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47013031" y3="2.89990254" z3="-5.14014247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92622623" y3="-0.50523643" z3="-3.4430186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09864451" y3="0.00203318" z3="-0.99884022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40838159" y3="-1.13665145" z3="-2.00845433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93616623" y3="-1.01620985" z3="-1.83244887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11756674" y3="-2.4584994" z3="-1.86594465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13665971" y3="-3.59628979" z3="0.65749087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02198585" y3="-5.29717618" z3="-4.74056894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24855997" y3="-5.02614211" z3="-3.70586099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84132619" y3="-4.30076445" z3="-1.09429231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78009957" y3="-4.62448059" z3="-2.85576306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5665487" y3="-5.09182329" z3="-3.24950353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86354913" y3="-4.72341742" z3="-1.9397679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4953627" y3="-4.27672144" z3="-1.53368215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81473325" y3="-4.56315695" z3="-3.20111749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36927816" y3="-5.40064037" z3="-3.92297115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90098224" y3="-4.74314199" z3="-1.598693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02697828" y3="-3.83875185" z3="0.22245485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16497057" y3="-3.62166328" z3="0.8696492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05457796" y3="-4.08303828" z3="0.43841595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15778479" y3="-3.48217458" z3="2.33614795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21276045" y3="-3.29157656" z3="5.13370318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35527973" y3="-3.67439949" z3="3.04043924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98765615" y3="-3.2009804" z3="3.05680007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01241805" y3="-3.10656558" z3="4.44532039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3820667" y3="-3.58089885" z3="4.42906538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27253247" y3="-3.90685353" z3="2.49300953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02726464" y3="-3.07832905" z3="2.55156299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08101233" y3="-2.90937332" z3="4.9837646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32155966" y3="-3.74152292" z3="4.96480203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23159752" y3="-3.22566393" z3="6.22514389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41990534" y3="-3.91818122" z3="-0.63192533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18402425" y3="-3.4261633" z3="-1.08819729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51204797" y3="0.21577043" z3="-4.70702301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07392174" y3="-1.6935393" z3="0.01090914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88312172" y3="-0.93736158" z3="1.16613236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81456738" y3="-0.29230048" z3="1.48541221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33503439" y3="0.57391577" z3="1.18887281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39271299" y3="1.44857081" z3="-0.45146565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00845552" y3="-0.68603938" z3="1.40150441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33188397" y3="1.79101169" z3="2.61339738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84991659" y3="-0.91533064" z3="2.072623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60354597" y3="-0.29831496" z3="3.32668994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17580616" y3="0.73990413" z3="-1.26912834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.40250296" y3="2.21670645" z3="-0.46133001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.35960659" y3="1.95781667" z3="-0.61651146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01809174" y3="-1.04459422" z3="2.44439647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98696383" y3="-0.22982888" z3="1.17554425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88968848" y3="-1.53080823" z3="0.70382287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40034719" y3="1.26912667" z3="3.58451845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60665071" y3="2.37470614" z3="2.61065041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17028852" y3="2.50672166" z3="2.54237011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7412318" y3="-0.7608684" z3="3.83334998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51468059" y3="-0.46051047" z3="3.91816799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42358138" y3="0.78150958" z3="3.20023506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84815854" y3="-0.73922416" z3="0.99138703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41254264" y3="-2.06223312" z3="0.84595449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76092547" y3="-2.71081833" z3="1.88747499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56281413" y3="-2.02382171" z3="3.08149687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05359067" y3="-0.73751389" z3="3.28397483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70430585" y3="-0.10214255" z3="2.23108651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5090924" y3="-2.55428177" z3="-0.12335203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35610955" y3="-3.7155103" z3="1.7584005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.7006706" y3="-2.62329882" z3="4.10498715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88030276" y3="-0.23302753" z3="4.23494417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05521576" y3="0.92634503" z3="2.35219225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80987727" y3="0.43371957" z3="-4.29591289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78644221" y3="-0.53485465" z3="-4.48447408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43052284" y3="-1.72607455" z3="-5.10604021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13896489" y3="-1.95468099" z3="-5.57039189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83033479" y3="-0.9824773" z3="-5.36106849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06159522" y3="1.35638846" z3="-3.76722904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80849987" y3="-0.38973104" z3="-4.13474513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43930406" y3="-2.7764048" z3="-5.25541099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09807192" y3="-2.89476459" z3="-6.06903903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85471723" y3="-1.16766552" z3="-5.68563632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38212133" y3="-1.93261607" z3="5.05417695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31255711" y3="-3.76037361" z3="3.92911299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20825159" y3="-3.67762233" z3="-6.03259382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44670296" y3="-2.69243724" z3="-4.58173962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05862634" y3="1.17370914" z3="-1.47679128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09378635" y3="1.56015577" z3="-2.45209476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42273424" y3="1.52079196" z3="-1.67089495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82455579" y3="2.20250188" z3="-2.79298981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15175852" y3="1.22258995" z3="-0.91138766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87717845" y3="2.45691883" z3="-2.93459355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54588776" y3="2.24805928" z3="-3.61259846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8732478" y3="2.55963426" z3="-3.77837554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82141129" y3="2.5182856" z3="-4.38444492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19835172" y3="3.08167529" z3="-4.68239646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36637577" y3="3.13479649" z3="-3.29305533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24695501" y3="3.54428543" z3="-4.07573198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16128782" y3="4.14749124" z3="-2.68467996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89413657" y3="5.4803513" z3="-2.88967271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99260204" y3="3.8601772" z3="-2.03906218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.52067275" y3="6.23749028" z3="-2.40892237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.00540699" y3="4.93061627" z3="-4.28241934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.81360822" y3="5.88179226" z3="-3.71044253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.1510075" y3="5.22609576" z3="-4.89916327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.61577317" y3="6.94560196" z3="-3.87238691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47763186" y3="-2.16473596" z3="-0.29273439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45911986" y3="-2.96464935" z3="-1.05194276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00242258" y3="-2.53480152" z3="0.60234485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08957699" y3="-1.34473536" z3="-0.71413902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17835986" y3="-1.40963823" z3="-1.16865654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31054428" y3="-0.36982509" z3="-1.51989514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10071888" y3="-1.54235084" z3="-0.97275719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43238078" y3="-2.06638338" z3="-2.01477535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3403,.0255,-.189;7.3846,.1642,.4222;6.6425,.4356,-.3347;4.7145,1.2223,-2.248;4.3843,.4059,-1.1786;2.7168,.8252,-3.6502;3.6128,1.7314,-3.1136;1.3521,2.5669,-4.5842;1.5448,1.2251,-4.3585;.4701,2.8999,-5.1401;2.9262,-.5052,-3.443;3.0986,.002,-.9988;2.4084,-1.1367,-2.0085;.9362,-1.0162,-1.8324;3.1176,-2.4585,-1.8659;-.1367,-3.5963,.6575;-.022,-5.2972,-4.7406;-.2486,-5.0261,-3.7059;-.8413,-4.3008,-1.0943;.7801,-4.6245,-2.8558;-1.5665,-5.0918,-3.2495;-1.8635,-4.7234,-1.9398;.4954,-4.2767,-1.5337;1.8147,-4.5632,-3.2011;-2.3693,-5.4006,-3.923;-2.901,-4.7431,-1.5987;-1.027,-3.8388,.2225;-2.165,-3.6217,.8696;-3.0546,-4.083,.4384;-2.1578,-3.4822,2.3361;-2.2128,-3.2916,5.1337;-3.3553,-3.6744,3.0404;-.9877,-3.201,3.0568;-1.0124,-3.1066,4.4453;-3.3821,-3.5809,4.4291;-4.2725,-3.9069,2.493;-.0273,-3.0783,2.5516;-.081,-2.9094,4.9838;-4.3216,-3.7415,4.9648;-2.2316,-3.2257,6.2251;1.4199,-3.9182,-.6319;2.184,-3.4262,-1.0882;.512,.2158,-4.707;-3.0739,-1.6935,.0109;-2.8831,-.9374,1.1661;-1.8146,-.2923,1.4854;-.335,.5739,1.1889;-.3927,1.4486,-.4515;1.0085,-.686,1.4015;-.3319,1.791,2.6134;-3.8499,-.9153,2.0726;-3.6035,-.2983,3.3267;-.1758,.7399,-1.2691;.4025,2.2167,-.4613;-1.3596,1.9578,-.6165;1.0181,-1.0446,2.4444;1.987,-.2298,1.1755;.8897,-1.5308,.7038;-.4003,1.2691,3.5845;.6067,2.3747,2.6107;-1.1703,2.5067,2.5424;-2.7412,-.7609,3.8333;-4.5147,-.4605,3.9182;-3.4236,.7815,3.2002;4.8482,-.7392,.9914;4.4125,-2.0622,.846;3.7609,-2.7108,1.8875;3.5628,-2.0238,3.0815;4.0536,-.7375,3.284;4.7043,-.1021,2.2311;4.5091,-2.5543,-.1234;3.3561,-3.7155,1.7584;2.7007,-2.6233,4.105;3.8803,-.233,4.2349;5.0552,.9263,2.3522;-.8099,.4337,-4.2959;-1.7864,-.5349,-4.4845;-1.4305,-1.7261,-5.106;-.139,-1.9547,-5.5704;.8303,-.9825,-5.3611;-1.0616,1.3564,-3.7672;-2.8085,-.3897,-4.1347;-2.4393,-2.7764,-5.2554;.0981,-2.8948,-6.069;1.8547,-1.1677,-5.6856;2.3821,-1.9326,5.0542;2.3126,-3.7604,3.9291;-2.2083,-3.6776,-6.0326;-3.4467,-2.6924,-4.5817;7.0586,1.1737,-1.4768;6.0938,1.5602,-2.4521;8.4227,1.5208,-1.6709;8.8246,2.2025,-2.793;9.1518,1.2226,-.9114;9.8772,2.4569,-2.9346;6.5459,2.2481,-3.6126;7.8732,2.5596,-3.7784;5.8214,2.5183,-4.3844;8.1984,3.0817,-4.6824;3.3664,3.1348,-3.2931;2.247,3.5443,-4.0757;4.1613,4.1475,-2.6847;3.8941,5.4804,-2.8897;4.9926,3.8602,-2.0391;4.5207,6.2375,-2.4089;2.0054,4.9306,-4.2824;2.8136,5.8818,-3.7104;1.151,5.2261,-4.8992;2.6158,6.9456,-3.8724;-4.4776,-2.1647,-.2927;-4.4591,-2.9646,-1.0519;-5.0024,-2.5348,.6023;-5.0896,-1.3447,-.7141;-2.1784,-1.4096,-1.1687;-2.3105,-.3698,-1.5199;-1.1007,-1.5424,-.9728;-2.4324,-2.0664,-2.0148;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650389622049</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002605866931 0.000395171748 0.018003718298 0.005339995971</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030453178 -0.000862290 0.000138218 0.000235043 0.000273903 0.000373414 0.000379094 0.000430100 0.000592431 0.000703230 0.000890707 0.001055349 0.001082699 0.001146311 0.001295978 0.001321451 0.001525164 0.001687459 0.001741264 0.001769126 0.001909855 0.002226353 0.002314326 0.002566271 0.002668610 0.003023730 0.003077656 0.003298109 0.003594743 0.003771345 0.004079600 0.004431188 0.004729984 0.004810282 0.005578568 0.005793877 0.005881891 0.006255337 0.006634628 0.007366601 0.007639673 0.007898451 0.008503586 0.009069297 0.009572704 0.010217953 0.010666197 0.011115751 0.011319905 0.011792215 0.012620492 0.013004659 0.013467988 0.013719175 0.014541847 0.015100890 0.015301676 0.015482299 0.015841728 0.016546006 0.016791325 0.017252577 0.018274196 0.018707706 0.019215306 0.020168671 0.021057087 0.021142646 0.022084950 0.022955601 0.024324347 0.024711003 0.025569545 0.026325054 0.026593257 0.028258725 0.029054658 0.030571453 0.031645563 0.031947455 0.033158852 0.033846884 0.035128905 0.035816519 0.038040142 0.038581124 0.039854510 0.040255233 0.041240818 0.044109987 0.044617744 0.044907733 0.046715031 0.049094584 0.049990244 0.050447498 0.050735560 0.051132045 0.052360312 0.052431829 0.052707954 0.052809369 0.054084649 0.054340498 0.055218942 0.055466323 0.056367204 0.056439944 0.056860169 0.057876678 0.059555109 0.060322546 0.061227320 0.061328817 0.062519520 0.063010244 0.063761583 0.064724243 0.064991637 0.066113480 0.067353683 0.068353533 0.071312358 0.072296284 0.073936616 0.075620375 0.077149564 0.083047862 0.084530341 0.086207850 0.086754136 0.087257925 0.089848743 0.090196848 0.092681784 0.094321628 0.094556676 0.096074095 0.096682624 0.097492426 0.098287435 0.099341488 0.099995689 0.101450155 0.101841471 0.102651873 0.103020914 0.103747386 0.103894770 0.105882534 0.106552087 0.106943710 0.108727440 0.109613232 0.110292597 0.111896338 0.112530975 0.114298311 0.115941344 0.118490362 0.120008324 0.120800520 0.121639459 0.123283218 0.124989849 0.126055318 0.126740477 0.131272167 0.134561570 0.135354375 0.142232610 0.142998017 0.146581299 0.146767646 0.149299765 0.151011318 0.153547138 0.154140268 0.156330302 0.159939311 0.161215731 0.172914043 0.173583658 0.177978127 0.183662767 0.184542905 0.188740253 0.189716360 0.192875973 0.193570083 0.197718875 0.199496312 0.204179759 0.206575811 0.206772844 0.209644996 0.210494338 0.214117444 0.215665088 0.217124792 0.219414482 0.224562473 0.225894808 0.231481191 0.234506560 0.234890905 0.235418826 0.244210790 0.255171781 0.256793439 0.262004251 0.267133687 0.278556376 0.282749483 0.286107959 0.289678842 0.294332234 0.303007394 0.305390909 0.305855569 0.307252550 0.314692050 0.315705484 0.321809720 0.327455879 0.330101844 0.349187144 0.350539353 0.352850040 0.354946080 0.357918622 0.361726416 0.362208744 0.379044626 0.383551360 0.390602260 0.409963881 0.424733335 0.428815842 0.450642679 0.467013584 0.469676446 0.475684600 0.481546609 0.483535019 0.489417461 0.504796666 0.512669811 0.534030619 0.565608056 0.572018579 0.589936415 0.592619501 0.603148445 0.605956833 0.640510452 0.645049212 0.646141987 0.673492462 0.675418506 0.684336198 0.691277834 0.692001861 0.698890015 0.703929804 0.715285793 0.740540678 0.750728073 0.753611749 0.760914170 0.772024712 0.778362335 0.809935004 0.810145917 0.813065461 0.820672918 0.821038399 0.825355723 0.830629421 0.832682204 0.835398988 0.843617687 0.845106353 0.846526365 0.857665326 0.864181412 0.864743062 0.872380922 0.878693757 0.883672340 0.888936871 0.891698709 0.898740860 0.901131407 0.919754813 0.922829119 0.931756227 0.934521391 0.964232206 0.975509718 0.984850416 1.000327250 1.013611536 1.025417063 1.040538117 1.048706152 1.055806435 1.064677871 1.085970551 1.087771962 1.102273685 1.105355452 1.112057883 1.114105193 1.123167282 1.135026743 1.139598577 1.170646123 1.173310082 1.178446980 1.183613713 1.187883501 1.194263907 1.216774868 1.224298710 1.269745060 1.298510347 1.316465527 1.327181416 1.330463131 1.332383351 1.333641423 1.335308327 1.341934096 1.344741501 1.358043246 1.374991590 1.381558625 1.382928350 1.390869860 1.419137338 1.422124057 1.551147101 1.660262823 1.773001144</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">114</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34134626" y3="0.0295446" z3="-0.1892695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38621875" y3="0.16273606" z3="0.42045965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64394029" y3="0.43336901" z3="-0.33695091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71710173" y3="1.22313701" z3="-2.25020167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38549099" y3="0.41042419" z3="-1.17894224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71809412" y3="0.82860094" z3="-3.65071617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61637598" y3="1.73358364" z3="-3.11633725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35590526" y3="2.5723657" z3="-4.58571519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54636768" y3="1.23008143" z3="-4.35830009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47431929" y3="2.90626208" z3="-5.14167847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92570951" y3="-0.50224936" z3="-3.44228155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09886914" y3="0.00804521" z3="-0.99849974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40730558" y3="-1.13145159" z3="-2.00674713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93522807" y3="-1.00988765" z3="-1.83008767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11511823" y3="-2.4539156" z3="-1.86335358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13609286" y3="-3.59811052" z3="0.65845191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01886197" y3="-5.29175689" z3="-4.74158611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24600333" y3="-5.02243222" z3="-3.70655121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83967035" y3="-4.30183998" z3="-1.09387298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78203687" y3="-4.61999896" z3="-2.85596575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56364165" y3="-5.09170907" z3="-3.25009886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86148672" y3="-4.72514942" z3="-1.93996039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49760666" y3="-4.2759852" z3="-1.53305189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81644734" y3="-4.55543001" z3="-3.20097547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36514677" y3="-5.40180219" z3="-3.9239092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8998767" y3="-4.74512805" z3="-1.59882258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02624104" y3="-3.84122665" z3="0.22321794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1648008" y3="-3.62584678" z3="0.87029443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05359664" y3="-4.08864155" z3="0.4390603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1576831" y3="-3.48753596" z3="2.33702877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21301388" y3="-3.29853327" z3="5.13473835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35507213" y3="-3.68282692" z3="3.0413118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9876765" y3="-3.20409149" z3="3.05785735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01270977" y3="-3.11037417" z3="4.44636445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38191823" y3="-3.5903287" z3="4.43000988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27245325" y3="-3.91670001" z3="2.49378542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02711227" y3="-3.07903621" z3="2.55255741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08178108" y3="-2.91069594" z3="4.98480763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32116346" y3="-3.75361635" z3="4.96573076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23199051" y3="-3.23329132" z3="6.22618834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.423625" y3="-3.91920061" z3="-0.63044297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18296722" y3="-3.42193646" z3="-1.08539647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51195739" y3="0.22192381" z3="-4.70498097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07561785" y3="-1.69945976" z3="0.01218091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88740881" y3="-0.94418122" z3="1.16874618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81964525" y3="-0.29785049" z3="1.48944483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34358073" y3="0.57297428" z3="1.19342933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40421994" y3="1.45000786" z3="-0.44576012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00403006" y3="-0.68296587" z3="1.40318693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34335234" y3="1.78787841" z3="2.61960938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85469219" y3="-0.92510281" z3="2.07480962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61171034" y3="-0.30850327" z3="3.32907443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18246408" y3="0.74378711" z3="-1.26355019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38939087" y3="2.22102801" z3="-0.45384895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37251701" y3="1.95314344" z3="-0.61146874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01798295" y3="-1.04007404" z3="2.44635735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98102466" y3="-0.22484193" z3="1.17362623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8858289" y3="-1.52910344" z3="0.70704528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40812929" y3="1.2646187" z3="3.589949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59283692" y3="2.37538281" z3="2.61639026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18471722" y3="2.50007435" z3="2.5506516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75020947" y3="-0.77101" z3="3.83682611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52385698" y3="-0.47199517" z3="3.91810869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43142675" y3="0.77201057" z3="3.20365958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84779309" y3="-0.73431432" z3="0.99142122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41177717" y3="-2.0576746" z3="0.84641102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75958812" y3="-2.70535162" z3="1.88826048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56053431" y3="-2.01705377" z3="3.08155492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05110926" y3="-0.73032249" z3="3.28341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70310219" y3="-0.09604033" z3="2.23070845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50851874" y3="-2.55078382" z3="-0.12267267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35556774" y3="-3.71041726" z3="1.76050327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69875343" y3="-2.61587222" z3="4.1057119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87746395" y3="-0.22475127" z3="4.23408028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05443932" y3="0.93257552" z3="2.35121555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80927065" y3="0.44115488" z3="-4.29272939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78687065" y3="-0.52746849" z3="-4.48054222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43239135" y3="-1.71919338" z3="-5.10159624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14158636" y3="-1.94916698" z3="-5.56784479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82860526" y3="-0.97702206" z3="-5.35907482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06021623" y3="1.36434518" z3="-3.76330511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80914139" y3="-0.38212302" z3="-4.12982598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4419482" y3="-2.76981857" z3="-5.24930348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09358839" y3="-2.88967087" z3="-6.06598198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85373207" y3="-1.16144864" z3="-5.68624014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3731555" y3="-1.92291085" z3="5.04946007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31891152" y3="-3.75484226" z3="3.93657527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21162212" y3="-3.67092327" z3="-6.02726853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44929023" y3="-2.68723342" z3="-4.57429773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06084844" y3="1.16658684" z3="-1.48070467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09618527" y3="1.55344885" z3="-2.45621099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42646468" y3="1.51418131" z3="-1.67476717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82943492" y3="2.19456112" z3="-2.79772263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15622407" y3="1.21921243" z3="-0.91414344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88391174" y3="2.45360613" z3="-2.93828375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54922844" y3="2.23790572" z3="-3.61812772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8779549" y3="2.54973122" z3="-3.78396012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82524221" y3="2.50951278" z3="-4.3898527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20404719" y3="3.07050926" z3="-4.68875075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37284268" y3="3.13741532" z3="-3.29809064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2534451" y3="3.54846613" z3="-4.0801939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17149473" y3="4.14888736" z3="-2.6937931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90809883" y3="5.48172077" z3="-2.90258911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00328825" y3="3.86027167" z3="-2.04918353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53867647" y3="6.2371884" z3="-2.42662797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01528839" y3="4.93489483" z3="-4.29012203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82710103" y3="5.88482378" z3="-3.72220999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16064188" y3="5.2317517" z3="-4.90602397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63332059" y3="6.94791937" z3="-3.88804946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47789123" y3="-2.17253757" z3="-0.29434225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4571864" y3="-2.97025397" z3="-1.05615978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00255143" y3="-2.54633182" z3="0.59935581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09152064" y3="-1.35271723" z3="-0.71386148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17921604" y3="-1.41235442" z3="-1.16573258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31256039" y3="-0.37184316" z3="-1.5157232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10232355" y3="-1.54250745" z3="-0.96765294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42971416" y3="-2.068217" z3="-2.01278058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3413,.0295,-.1893;7.3862,.1627,.4205;6.6439,.4334,-.337;4.7171,1.2231,-2.2502;4.3855,.4104,-1.1789;2.7181,.8286,-3.6507;3.6164,1.7336,-3.1163;1.3559,2.5724,-4.5857;1.5464,1.2301,-4.3583;.4743,2.9063,-5.1417;2.9257,-.5022,-3.4423;3.0989,.008,-.9985;2.4073,-1.1315,-2.0067;.9352,-1.0099,-1.8301;3.1151,-2.4539,-1.8634;-.1361,-3.5981,.6585;-.0189,-5.2918,-4.7416;-.246,-5.0224,-3.7066;-.8397,-4.3018,-1.0939;.782,-4.62,-2.856;-1.5636,-5.0917,-3.2501;-1.8615,-4.7251,-1.94;.4976,-4.276,-1.5331;1.8164,-4.5554,-3.201;-2.3651,-5.4018,-3.9239;-2.8999,-4.7451,-1.5988;-1.0262,-3.8412,.2232;-2.1648,-3.6258,.8703;-3.0536,-4.0886,.4391;-2.1577,-3.4875,2.337;-2.213,-3.2985,5.1347;-3.3551,-3.6828,3.0413;-.9877,-3.2041,3.0579;-1.0127,-3.1104,4.4464;-3.3819,-3.5903,4.43;-4.2725,-3.9167,2.4938;-.0271,-3.079,2.5526;-.0818,-2.9107,4.9848;-4.3212,-3.7536,4.9657;-2.232,-3.2333,6.2262;1.4236,-3.9192,-.6304;2.183,-3.4219,-1.0854;.512,.2219,-4.705;-3.0756,-1.6995,.0122;-2.8874,-.9442,1.1687;-1.8196,-.2979,1.4894;-.3436,.573,1.1934;-.4042,1.45,-.4458;1.004,-.683,1.4032;-.3434,1.7879,2.6196;-3.8547,-.9251,2.0748;-3.6117,-.3085,3.3291;-.1825,.7438,-1.2636;.3894,2.221,-.4538;-1.3725,1.9531,-.6115;1.018,-1.0401,2.4464;1.981,-.2248,1.1736;.8858,-1.5291,.707;-.4081,1.2646,3.5899;.5928,2.3754,2.6164;-1.1847,2.5001,2.5507;-2.7502,-.771,3.8368;-4.5239,-.472,3.9181;-3.4314,.772,3.2037;4.8478,-.7343,.9914;4.4118,-2.0577,.8464;3.7596,-2.7054,1.8883;3.5605,-2.0171,3.0816;4.0511,-.7303,3.2834;4.7031,-.096,2.2307;4.5085,-2.5508,-.1227;3.3556,-3.7104,1.7605;2.6988,-2.6159,4.1057;3.8775,-.2248,4.2341;5.0544,.9326,2.3512;-.8093,.4412,-4.2927;-1.7869,-.5275,-4.4805;-1.4324,-1.7192,-5.1016;-.1416,-1.9492,-5.5678;.8286,-.977,-5.3591;-1.0602,1.3643,-3.7633;-2.8091,-.3821,-4.1298;-2.4419,-2.7698,-5.2493;.0936,-2.8897,-6.066;1.8537,-1.1614,-5.6862;2.3732,-1.9229,5.0495;2.3189,-3.7548,3.9366;-2.2116,-3.6709,-6.0273;-3.4493,-2.6872,-4.5743;7.0608,1.1666,-1.4807;6.0962,1.5534,-2.4562;8.4265,1.5142,-1.6748;8.8294,2.1946,-2.7977;9.1562,1.2192,-.9141;9.8839,2.4536,-2.9383;6.5492,2.2379,-3.6181;7.878,2.5497,-3.784;5.8252,2.5095,-4.3899;8.204,3.0705,-4.6888;3.3728,3.1374,-3.2981;2.2534,3.5485,-4.0802;4.1715,4.1489,-2.6938;3.9081,5.4817,-2.9026;5.0033,3.8603,-2.0492;4.5387,6.2372,-2.4266;2.0153,4.9349,-4.2901;2.8271,5.8848,-3.7222;1.1606,5.2318,-4.906;2.6333,6.9479,-3.888;-4.4779,-2.1725,-.2943;-4.4572,-2.9703,-1.0562;-5.0026,-2.5463,.5994;-5.0915,-1.3527,-.7139;-2.1792,-1.4124,-1.1657;-2.3126,-.3718,-1.5157;-1.1023,-1.5425,-.9677;-2.4297,-2.0682,-2.0128;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650398224054</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002327310741 0.000366035347 0.021013196418 0.005338263550</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030453540 -0.000792622 0.000141825 0.000236324 0.000273908 0.000373344 0.000380736 0.000434742 0.000593299 0.000703408 0.000892614 0.001056580 0.001082796 0.001158439 0.001297937 0.001323718 0.001527297 0.001700876 0.001742331 0.001785586 0.001922493 0.002235147 0.002326732 0.002566677 0.002670500 0.003027029 0.003087339 0.003298181 0.003622576 0.003773520 0.004080057 0.004435957 0.004740498 0.004810391 0.005585795 0.005795188 0.005887586 0.006255275 0.006634564 0.007366615 0.007640478 0.007902257 0.008519377 0.009082211 0.009573861 0.010220491 0.010784730 0.011119603 0.011393333 0.011792359 0.012625037 0.013007149 0.013487639 0.013721033 0.014542526 0.015101320 0.015302401 0.015482275 0.015847826 0.016561194 0.016811777 0.017254780 0.018283829 0.018711887 0.019219220 0.020179965 0.021063241 0.021143050 0.022088023 0.022955745 0.024333610 0.024712549 0.025573191 0.026331358 0.026593459 0.028303517 0.029058336 0.030649993 0.031657077 0.031962818 0.033160109 0.033847098 0.035128392 0.035817903 0.038040233 0.038587309 0.039856989 0.040255845 0.041240660 0.044117703 0.044623291 0.044907489 0.046719296 0.049095586 0.049994607 0.050478184 0.050743181 0.051132046 0.052365183 0.052433162 0.052709358 0.052809465 0.054086017 0.054343553 0.055219204 0.055517155 0.056368067 0.056443099 0.056860775 0.057916021 0.059554697 0.060332982 0.061227166 0.061346119 0.062530904 0.063013085 0.063780729 0.064729616 0.064992052 0.066116436 0.067354554 0.068354780 0.071313142 0.072296897 0.073937995 0.075651703 0.077153349 0.083086579 0.084538352 0.086209286 0.086764773 0.087268142 0.089849843 0.090200439 0.092684030 0.094325384 0.094556776 0.096076449 0.096715832 0.097496748 0.098288149 0.099342126 0.099997572 0.101467954 0.101846079 0.102652059 0.103023248 0.103748676 0.103895024 0.105914480 0.106552037 0.106944513 0.108730750 0.109631504 0.110327045 0.111896055 0.112535639 0.114309158 0.115942648 0.118493541 0.120008659 0.120813034 0.121639758 0.123295447 0.124993290 0.126057881 0.126743812 0.131278059 0.134592882 0.135355022 0.142241824 0.143003674 0.146583389 0.146773514 0.149311954 0.151012882 0.153649745 0.154182865 0.156333498 0.159950564 0.161231183 0.172927103 0.173588311 0.177995195 0.183666376 0.184545981 0.188763735 0.189716969 0.192878608 0.193571828 0.197722507 0.199497925 0.204183219 0.206581102 0.206772901 0.209645818 0.210498892 0.214130732 0.215668442 0.217125501 0.219442361 0.224566804 0.225902658 0.231488070 0.234520865 0.234892482 0.235428590 0.244235514 0.255174973 0.256795168 0.262011204 0.267135134 0.278573763 0.282749553 0.286109572 0.289678809 0.294356513 0.303092192 0.305391021 0.305868845 0.307268784 0.314721690 0.315749330 0.321809802 0.327480685 0.330111744 0.349199839 0.350539305 0.352888897 0.354959932 0.357918860 0.361740741 0.362208733 0.379052841 0.383554422 0.390617510 0.409967397 0.424790923 0.428815667 0.450648231 0.467016466 0.469691562 0.475696042 0.481558220 0.483592902 0.489427188 0.504820666 0.512795354 0.534073845 0.565630030 0.572096740 0.589956207 0.592642215 0.603169448 0.605957684 0.640597201 0.645053165 0.646178407 0.673492623 0.675418524 0.684348617 0.691281351 0.692022636 0.698891590 0.703934595 0.715292812 0.740560037 0.750751665 0.753632645 0.761001379 0.772047755 0.778366633 0.809972380 0.810172300 0.813068898 0.820678513 0.821042286 0.825358626 0.830635637 0.832692400 0.835450604 0.843633333 0.845111551 0.846528473 0.857665438 0.864194343 0.864747159 0.872400051 0.878697224 0.883673734 0.888945773 0.891700518 0.898803992 0.901144992 0.919758788 0.922880167 0.931760162 0.934521909 0.964239944 0.975526112 0.984878620 1.000341040 1.013634439 1.025460958 1.040539352 1.048728685 1.055854433 1.064678398 1.085970533 1.087772140 1.102282431 1.105371085 1.112057878 1.114120344 1.123170006 1.135027488 1.139601594 1.170648453 1.173371736 1.178555390 1.183693796 1.187903322 1.194271615 1.216775926 1.224301666 1.270165592 1.298530648 1.316633841 1.327183536 1.330666703 1.332389510 1.333656686 1.335340929 1.341938006 1.344750294 1.358046228 1.374992741 1.381778239 1.382992824 1.390881570 1.419138439 1.422235839 1.551159423 1.660327329 1.773001826</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">115</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34145706" y3="0.0322573" z3="-0.18998212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38669894" y3="0.16299772" z3="0.41962725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64520809" y3="0.43504933" z3="-0.33775999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71960354" y3="1.22470574" z3="-2.25249799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38644717" y3="0.41365408" z3="-1.18013769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71988542" y3="0.83120983" z3="-3.65268041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61988383" y3="1.7355406" z3="-3.11965652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36169751" y3="2.57535322" z3="-4.5922444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54912791" y3="1.23347926" z3="-4.36167308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48076427" y3="2.90966258" z3="-5.14904872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92435008" y3="-0.49934779" z3="-3.44168926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09923463" y3="0.01471788" z3="-0.99899384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40661353" y3="-1.12585497" z3="-2.00495361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93468892" y3="-1.00353724" z3="-1.82796363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11495483" y3="-2.44802912" z3="-1.86030402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13631425" y3="-3.60220057" z3="0.66033041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01590154" y3="-5.28385886" z3="-4.74306351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24367182" y3="-5.01683935" z3="-3.70757963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83872974" y3="-4.30319082" z3="-1.09375791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78378757" y3="-4.61437773" z3="-2.85611025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5616352" y3="-5.08874228" z3="-3.25180173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85981855" y3="-4.72641914" z3="-1.94070982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49772021" y3="-4.27190224" z3="-1.5329569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8188316" y3="-4.54922565" z3="-3.20142824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36302386" y3="-5.39812134" z3="-3.92651868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8969724" y3="-4.75165569" z3="-1.5996404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02586702" y3="-3.84579826" z3="0.22433002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16470014" y3="-3.63178062" z3="0.87121344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05319285" y3="-4.09486185" z3="0.43943751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15792504" y3="-3.49388819" z3="2.33789425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21379864" y3="-3.30574315" z3="5.13558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35424712" y3="-3.69369453" z3="3.0422324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98939446" y3="-3.20599329" z3="3.05853378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01471092" y3="-3.11268311" z3="4.44708917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38138809" y3="-3.60168075" z3="4.43095297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27017444" y3="-3.93124828" z3="2.49477793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03004972" y3="-3.07624313" z3="2.55316259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08467217" y3="-2.90958295" z3="4.98542728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31968271" y3="-3.76873553" z3="4.96675196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23300637" y3="-3.24071745" z3="6.22704052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41989482" y3="-3.91139275" z3="-0.63010796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18395504" y3="-3.41657691" z3="-1.0853297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51295703" y3="0.22624356" z3="-4.70621286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07677519" y3="-1.70530482" z3="0.01350369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88994949" y3="-0.95112792" z3="1.17122126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82249679" y3="-0.30457949" z3="1.49387929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34998903" y3="0.57155321" z3="1.19840537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4137129" y3="1.45029767" z3="-0.4396963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00082779" y3="-0.68162877" z3="1.4046838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35263394" y3="1.7839197" z3="2.62661923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85859539" y3="-0.93382001" z3="2.07597312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61829551" y3="-0.31831149" z3="3.33149488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18989966" y3="0.74538894" z3="-1.2588439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37546164" y3="2.22480951" z3="-0.44678135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38427384" y3="1.95183658" z3="-0.60462548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01698654" y3="-1.04014829" z3="2.44770149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97710588" y3="-0.22221302" z3="1.17376898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88139021" y3="-1.52758174" z3="0.70807568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4157201" y3="1.25856864" z3="3.59616882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58191882" y3="2.37410643" z3="2.62412168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19607233" y3="2.49424539" z3="2.55932526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75570857" y3="-0.7783497" z3="3.83965602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.530226" y3="-0.4857564" z3="3.91969951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4427532" y3="0.76248439" z3="3.20743513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84678657" y3="-0.72913222" z3="0.99164104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41236164" y3="-2.0528353" z3="0.84881673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76002535" y3="-2.69948156" z3="1.89118137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55949871" y3="-2.00966145" z3="3.08318046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04817168" y3="-0.72214873" z3="3.28287821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70005728" y3="-0.08891285" z3="2.22939019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51052775" y3="-2.54712041" z3="-0.11927769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35660511" y3="-3.70497694" z3="1.76428868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69664662" y3="-2.60765291" z3="4.10689736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87276002" y3="-0.21527859" z3="4.23225849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04986415" y3="0.94015129" z3="2.34825874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80745628" y3="0.44680747" z3="-4.29105489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78604955" y3="-0.52031768" z3="-4.47468448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4337305" y3="-1.71286966" z3="-5.09624306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14385527" y3="-1.94384146" z3="-5.56408552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82745922" y3="-0.9732895" z3="-5.35924829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05597398" y3="1.37062525" z3="-3.76291342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80744534" y3="-0.37385168" z3="-4.12216371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44443453" y3="-2.76242287" z3="-5.24250177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09022568" y3="-2.88487076" z3="-6.06261501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85084788" y3="-1.16030517" z3="-5.68657638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37235531" y3="-1.91375554" z3="5.0514983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31357805" y3="-3.74696243" z3="3.93556938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21762344" y3="-3.66313232" z3="-6.02156706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4488547" y3="-2.67771501" z3="-4.56487247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06382228" y3="1.1667412" z3="-1.48251767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10009798" y3="1.55425572" z3="-2.45854916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42943536" y3="1.5069892" z3="-1.67855094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83371429" y3="2.18327947" z3="-2.80324155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15792046" y3="1.20935582" z3="-0.91813186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88747784" y3="2.43259293" z3="-2.94631491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55467075" y3="2.23602245" z3="-3.62174443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88347558" y3="2.5411001" z3="-3.78938639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83114217" y3="2.50741922" z3="-4.39398701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21042902" y3="3.05905533" z3="-4.6954364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37943945" y3="3.13941131" z3="-3.30463751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26140706" y3="3.55081331" z3="-4.08840831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17934374" y3="4.15120844" z3="-2.70092968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91891566" y3="5.48440704" z3="-2.91219864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0094922" y3="3.86275266" z3="-2.05434045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5488422" y3="6.24146921" z3="-2.43436988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02700365" y3="4.93704525" z3="-4.30187485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84018893" y3="5.88703849" z3="-3.7346872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17374129" y3="5.23388685" z3="-4.91955635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64805998" y3="6.95088687" z3="-3.90196764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4792275" y3="-2.1796271" z3="-0.29325128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45905" y3="-2.97792729" z3="-1.05565953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00374907" y3="-2.55338038" z3="0.60145772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09321636" y3="-1.35975707" z3="-0.71208371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17954173" y3="-1.41571041" z3="-1.16325933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31424976" y3="-0.37509212" z3="-1.51191022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10230514" y3="-1.54516988" z3="-0.96422159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4284384" y3="-2.07078551" z3="-2.01170046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3415,.0323,-.19;7.3867,.163,.4196;6.6452,.435,-.3378;4.7196,1.2247,-2.2525;4.3864,.4137,-1.1801;2.7199,.8312,-3.6527;3.6199,1.7355,-3.1197;1.3617,2.5754,-4.5922;1.5491,1.2335,-4.3617;.4808,2.9097,-5.149;2.9244,-.4993,-3.4417;3.0992,.0147,-.999;2.4066,-1.1259,-2.005;.9347,-1.0035,-1.828;3.115,-2.448,-1.8603;-.1363,-3.6022,.6603;-.0159,-5.2839,-4.7431;-.2437,-5.0168,-3.7076;-.8387,-4.3032,-1.0938;.7838,-4.6144,-2.8561;-1.5616,-5.0887,-3.2518;-1.8598,-4.7264,-1.9407;.4977,-4.2719,-1.533;1.8188,-4.5492,-3.2014;-2.363,-5.3981,-3.9265;-2.897,-4.7517,-1.5996;-1.0259,-3.8458,.2243;-2.1647,-3.6318,.8712;-3.0532,-4.0949,.4394;-2.1579,-3.4939,2.3379;-2.2138,-3.3057,5.1356;-3.3542,-3.6937,3.0422;-.9894,-3.206,3.0585;-1.0147,-3.1127,4.4471;-3.3814,-3.6017,4.431;-4.2702,-3.9312,2.4948;-.03,-3.0762,2.5532;-.0847,-2.9096,4.9854;-4.3197,-3.7687,4.9668;-2.233,-3.2407,6.227;1.4199,-3.9114,-.6301;2.184,-3.4166,-1.0853;.513,.2262,-4.7062;-3.0768,-1.7053,.0135;-2.8899,-.9511,1.1712;-1.8225,-.3046,1.4939;-.35,.5716,1.1984;-.4137,1.4503,-.4397;1.0008,-.6816,1.4047;-.3526,1.7839,2.6266;-3.8586,-.9338,2.076;-3.6183,-.3183,3.3315;-.1899,.7454,-1.2588;.3755,2.2248,-.4468;-1.3843,1.9518,-.6046;1.017,-1.0401,2.4477;1.9771,-.2222,1.1738;.8814,-1.5276,.7081;-.4157,1.2586,3.5962;.5819,2.3741,2.6241;-1.1961,2.4942,2.5593;-2.7557,-.7783,3.8397;-4.5302,-.4858,3.9197;-3.4428,.7625,3.2074;4.8468,-.7291,.9916;4.4124,-2.0528,.8488;3.76,-2.6995,1.8912;3.5595,-2.0097,3.0832;4.0482,-.7221,3.2829;4.7001,-.0889,2.2294;4.5105,-2.5471,-.1193;3.3566,-3.705,1.7643;2.6966,-2.6077,4.1069;3.8728,-.2153,4.2323;5.0499,.9402,2.3483;-.8075,.4468,-4.2911;-1.786,-.5203,-4.4747;-1.4337,-1.7129,-5.0962;-.1439,-1.9438,-5.5641;.8275,-.9733,-5.3592;-1.056,1.3706,-3.7629;-2.8074,-.3739,-4.1222;-2.4444,-2.7624,-5.2425;.0902,-2.8849,-6.0626;1.8508,-1.1603,-5.6866;2.3724,-1.9138,5.0515;2.3136,-3.747,3.9356;-2.2176,-3.6631,-6.0216;-3.4489,-2.6777,-4.5649;7.0638,1.1667,-1.4825;6.1001,1.5543,-2.4585;8.4294,1.507,-1.6786;8.8337,2.1833,-2.8032;9.1579,1.2094,-.9181;9.8875,2.4326,-2.9463;6.5547,2.236,-3.6217;7.8835,2.5411,-3.7894;5.8311,2.5074,-4.394;8.2104,3.0591,-4.6954;3.3794,3.1394,-3.3046;2.2614,3.5508,-4.0884;4.1793,4.1512,-2.7009;3.9189,5.4844,-2.9122;5.0095,3.8628,-2.0543;4.5488,6.2415,-2.4344;2.027,4.937,-4.3019;2.8402,5.887,-3.7347;1.1737,5.2339,-4.9196;2.6481,6.9509,-3.902;-4.4792,-2.1796,-.2933;-4.4591,-2.9779,-1.0557;-5.0037,-2.5534,.6015;-5.0932,-1.3598,-.7121;-2.1795,-1.4157,-1.1633;-2.3142,-.3751,-1.5119;-1.1023,-1.5452,-.9642;-2.4284,-2.0708,-2.0117;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650403593145</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001937398951 0.000368975945 0.019831192141 0.005335289637</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030453951 -0.000840656 0.000141025 0.000236590 0.000274017 0.000373305 0.000380869 0.000434613 0.000593905 0.000704243 0.000893078 0.001060293 0.001084904 0.001161991 0.001298560 0.001323761 0.001527370 0.001704112 0.001745463 0.001805755 0.001938198 0.002238058 0.002338478 0.002569123 0.002676840 0.003028961 0.003097404 0.003298627 0.003661555 0.003773868 0.004080269 0.004435295 0.004760006 0.004811348 0.005608197 0.005800715 0.005896399 0.006256979 0.006634787 0.007366591 0.007642258 0.007910046 0.008548639 0.009105562 0.009576331 0.010220153 0.010837558 0.011119320 0.011457275 0.011793884 0.012634620 0.013007208 0.013536892 0.013720988 0.014544083 0.015101618 0.015302657 0.015482324 0.015853040 0.016560883 0.016859428 0.017257718 0.018302100 0.018713270 0.019225992 0.020190715 0.021064918 0.021143273 0.022096047 0.022955862 0.024399045 0.024730138 0.025576689 0.026333833 0.026593617 0.028339152 0.029065153 0.030680417 0.031664883 0.031978480 0.033160346 0.033847354 0.035135808 0.035818096 0.038040405 0.038587640 0.039864118 0.040256481 0.041241533 0.044124867 0.044625124 0.044907983 0.046723834 0.049096211 0.049996527 0.050498916 0.050750721 0.051132717 0.052373835 0.052435068 0.052714589 0.052810350 0.054089323 0.054348946 0.055219262 0.055564077 0.056369576 0.056444594 0.056861662 0.057946084 0.059559991 0.060349137 0.061229466 0.061364680 0.062536501 0.063020545 0.063799476 0.064733611 0.064993617 0.066116104 0.067358633 0.068356387 0.071318580 0.072297914 0.073937949 0.075680230 0.077167082 0.083121039 0.084543315 0.086212048 0.086777156 0.087282039 0.089849825 0.090204617 0.092684418 0.094325168 0.094556793 0.096081530 0.096750483 0.097502822 0.098288449 0.099342255 0.099999132 0.101484395 0.101845903 0.102654386 0.103025471 0.103750471 0.103895502 0.105977664 0.106552535 0.106950362 0.108733306 0.109654525 0.110345504 0.111900681 0.112535740 0.114321899 0.115942506 0.118508717 0.120010783 0.120829613 0.121639757 0.123298366 0.124995964 0.126060971 0.126743641 0.131289239 0.134612378 0.135356686 0.142256173 0.143005124 0.146589706 0.146787174 0.149328105 0.151019034 0.153743160 0.154233834 0.156336444 0.159957191 0.161230082 0.172952841 0.173592890 0.178016449 0.183670113 0.184547939 0.188794589 0.189719121 0.192884249 0.193582731 0.197730529 0.199510032 0.204184050 0.206588875 0.206772988 0.209646489 0.210500896 0.214142282 0.215677823 0.217126378 0.219471963 0.224576115 0.225908299 0.231490529 0.234538078 0.234897898 0.235436802 0.244251338 0.255182637 0.256798336 0.262034542 0.267145616 0.278593632 0.282749553 0.286109871 0.289679086 0.294362229 0.303126577 0.305391316 0.305876091 0.307277501 0.314763237 0.315785045 0.321810168 0.327503072 0.330122280 0.349223391 0.350552669 0.352931273 0.354993735 0.357929381 0.361754262 0.362209063 0.379054136 0.383557160 0.390623300 0.409977864 0.424833897 0.428847069 0.450661735 0.467017629 0.469727905 0.475705404 0.481585842 0.483606984 0.489430708 0.504831017 0.512865969 0.534101018 0.565647127 0.572164373 0.590000352 0.592681291 0.603196054 0.605957913 0.640723684 0.645054834 0.646193873 0.673492651 0.675419738 0.684360313 0.691284076 0.692024854 0.698904197 0.703936464 0.715294368 0.740569137 0.750767587 0.753653731 0.761179463 0.772063390 0.778378630 0.810004322 0.810198896 0.813071133 0.820685723 0.821047571 0.825361886 0.830643346 0.832693466 0.835475855 0.843658046 0.845112732 0.846529319 0.857667642 0.864219850 0.864748652 0.872412203 0.878701614 0.883677230 0.888954906 0.891701979 0.898861780 0.901144855 0.919759289 0.922921061 0.931773902 0.934522062 0.964256192 0.975538525 0.984898111 1.000343727 1.013661053 1.025525123 1.040539917 1.048744721 1.055921245 1.064691569 1.085973649 1.087781558 1.102291885 1.105399274 1.112059311 1.114134790 1.123175399 1.135028188 1.139611301 1.170649913 1.173446987 1.178600008 1.183733698 1.187919895 1.194274346 1.216775979 1.224308879 1.270429562 1.298552224 1.316768013 1.327193848 1.330777615 1.332425418 1.333657099 1.335351594 1.341949025 1.344756298 1.358051701 1.374998684 1.381932000 1.383102603 1.390903733 1.419144955 1.422483910 1.551182282 1.660380762 1.773018450</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">116</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3417022" y3="0.03448533" z3="-0.19070238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38756611" y3="0.15834517" z3="0.41663449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64625076" y3="0.43152539" z3="-0.34057139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72194991" y3="1.22620842" z3="-2.25436765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38723304" y3="0.41788949" z3="-1.18045865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72129854" y3="0.83485467" z3="-3.65308309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62318348" y3="1.73826411" z3="-3.12202802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36617128" y3="2.57985977" z3="-4.59544961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55121906" y3="1.23794941" z3="-4.36245253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4858101" y3="2.9150532" z3="-5.15256279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92345891" y3="-0.49581148" z3="-3.44005519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09907348" y3="0.02206839" z3="-0.99813327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40463029" y3="-1.11898102" z3="-2.00225165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93289902" y3="-0.994683" z3="-1.82531027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11110986" y3="-2.44189533" z3="-1.85569636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13634674" y3="-3.60406398" z3="0.66162603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01314883" y3="-5.27710051" z3="-4.74452141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24115561" y3="-5.01260065" z3="-3.70841764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83791169" y3="-4.30339817" z3="-1.09318025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78502394" y3="-4.60845215" z3="-2.85673864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55825717" y3="-5.08937739" z3="-3.25181904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85763403" y3="-4.72867976" z3="-1.94032186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49924825" y3="-4.27025031" z3="-1.53253615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81851034" y3="-4.53713821" z3="-3.20168782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35840207" y3="-5.40072976" z3="-3.92650896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89576584" y3="-4.75469602" z3="-1.59896909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0259323" y3="-3.84755994" z3="0.22532653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16514517" y3="-3.63549985" z3="0.87220682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05277311" y3="-4.09961227" z3="0.44004167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15866615" y3="-3.49881848" z3="2.33901526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2142641" y3="-3.31374423" z3="5.13693375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35465304" y3="-3.70191619" z3="3.04315837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99033285" y3="-3.20901235" z3="3.05992386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01543901" y3="-3.11732859" z3="4.44860658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38169368" y3="-3.61129791" z3="4.43200975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27064861" y3="-3.9405527" z3="2.49543199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03091769" y3="-3.07684309" z3="2.55451528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0855125" y3="-2.91277761" z3="4.98715969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3198487" y3="-3.78066368" z3="4.96770939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23322739" y3="-3.25008386" z3="6.22851564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42357309" y3="-3.91233721" z3="-0.62869369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1814067" y3="-3.41092322" z3="-1.08185452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51356242" y3="0.23168492" z3="-4.70481807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07899811" y3="-1.70988201" z3="0.01591728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89617863" y3="-0.95684318" z3="1.17434716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83226867" y3="-0.30704144" z3="1.49940627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35779252" y3="0.56891191" z3="1.20283156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42460396" y3="1.45106518" z3="-0.43328351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99603321" y3="-0.68156752" z3="1.40594247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36019596" y3="1.77960878" z3="2.632905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86543746" y3="-0.94378812" z3="2.07822965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62641247" y3="-0.32905783" z3="3.33476326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19594826" y3="0.74982243" z3="-1.25335914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36231216" y3="2.22889474" z3="-0.43735882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39702122" y3="1.94726058" z3="-0.59840905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01606273" y3="-1.0383224" z3="2.44904306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96934966" y3="-0.21841249" z3="1.17261401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87984983" y3="-1.52801739" z3="0.71052335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4207691" y3="1.25280622" z3="3.60174624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57265481" y3="2.37229876" z3="2.62995711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2056939" y3="2.48724509" z3="2.56766901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76286985" y3="-0.78857211" z3="3.84220741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53851534" y3="-0.49808534" z3="3.92287936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45122507" y3="0.75256591" z3="3.2123039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84564917" y3="-0.72475813" z3="0.99181358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41121274" y3="-2.04886714" z3="0.85048846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75825853" y3="-2.69394798" z3="1.89335988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55698053" y3="-2.00219524" z3="3.08417257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04543509" y3="-0.71407557" z3="3.28245183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69801922" y3="-0.0824002" z3="2.22854428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51038002" y3="-2.54485037" z3="-0.11658944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35547479" y3="-3.69986335" z3="1.76811066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6952279" y3="-2.59931567" z3="4.10931908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86993286" y3="-0.20569601" z3="4.23126284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04814205" y3="0.94696168" z3="2.34636333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80575663" y3="0.45344568" z3="-4.28851553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7853431" y3="-0.51420305" z3="-4.47227818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4348646" y3="-1.70680841" z3="-5.09347037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14609804" y3="-1.93936457" z3="-5.56390731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82630622" y3="-0.96838879" z3="-5.3585441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05353404" y3="1.37760333" z3="-3.75944513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80559792" y3="-0.36653404" z3="-4.11794336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44640668" y3="-2.75538105" z3="-5.23721701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08601025" y3="-2.88059819" z3="-6.06187511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85021894" y3="-1.15463976" z3="-5.68847717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36835851" y3="-1.90409855" z3="5.05156511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31677869" y3="-3.73954574" z3="3.94244627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22103205" y3="-3.65608359" z3="-6.01700912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45045205" y3="-2.67178584" z3="-4.55721713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06601028" y3="1.16038117" z3="-1.48658212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10273931" y3="1.55009149" z3="-2.46220811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43308041" y3="1.49957928" z3="-1.68305822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8387809" y3="2.17564866" z3="-2.80795756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16139327" y3="1.20101853" z3="-0.92271656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8943272" y3="2.42828607" z3="-2.95028848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55854485" y3="2.22960347" z3="-3.62630766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88861406" y3="2.53430342" z3="-3.79405651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83543603" y3="2.50272595" z3="-4.39830619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21672014" y3="3.05158142" z3="-4.70032709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38574447" y3="3.14210662" z3="-3.31011906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26821828" y3="3.55429378" z3="-4.09431082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18907985" y3="4.15267932" z3="-2.71065445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93190597" y3="5.4857589" z3="-2.92590267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01927687" y3="3.86344937" z3="-2.06430012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56640612" y3="6.24016179" z3="-2.45420107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03641809" y3="4.9409765" z3="-4.31069747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85293779" y3="5.889795" z3="-3.74770461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18337606" y3="5.23867589" z3="-4.92836242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66410074" y3="6.95305593" z3="-3.91882278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47859704" y3="-2.18722618" z3="-0.29491193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45198397" y3="-2.98077282" z3="-1.05949206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00326271" y3="-2.56734866" z3="0.59541437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09470548" y3="-1.36840489" z3="-0.71252226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18102754" y3="-1.41761425" z3="-1.1597789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31733763" y3="-0.3773565" z3="-1.50826511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10359353" y3="-1.54496566" z3="-0.96061607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42877624" y3="-2.07267566" z3="-2.00889289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3417,.0345,-.1907;7.3876,.1583,.4166;6.6463,.4315,-.3406;4.7219,1.2262,-2.2544;4.3872,.4179,-1.1805;2.7213,.8349,-3.6531;3.6232,1.7383,-3.122;1.3662,2.5799,-4.5954;1.5512,1.2379,-4.3625;.4858,2.9151,-5.1526;2.9235,-.4958,-3.4401;3.0991,.0221,-.9981;2.4046,-1.119,-2.0023;.9329,-.9947,-1.8253;3.1111,-2.4419,-1.8557;-.1363,-3.6041,.6616;-.0131,-5.2771,-4.7445;-.2412,-5.0126,-3.7084;-.8379,-4.3034,-1.0932;.785,-4.6085,-2.8567;-1.5583,-5.0894,-3.2518;-1.8576,-4.7287,-1.9403;.4992,-4.2703,-1.5325;1.8185,-4.5371,-3.2017;-2.3584,-5.4007,-3.9265;-2.8958,-4.7547,-1.599;-1.0259,-3.8476,.2253;-2.1651,-3.6355,.8722;-3.0528,-4.0996,.44;-2.1587,-3.4988,2.339;-2.2143,-3.3137,5.1369;-3.3547,-3.7019,3.0432;-.9903,-3.209,3.0599;-1.0154,-3.1173,4.4486;-3.3817,-3.6113,4.432;-4.2706,-3.9406,2.4954;-.0309,-3.0768,2.5545;-.0855,-2.9128,4.9872;-4.3198,-3.7807,4.9677;-2.2332,-3.2501,6.2285;1.4236,-3.9123,-.6287;2.1814,-3.4109,-1.0819;.5136,.2317,-4.7048;-3.079,-1.7099,.0159;-2.8962,-.9568,1.1743;-1.8323,-.307,1.4994;-.3578,.5689,1.2028;-.4246,1.4511,-.4333;.996,-.6816,1.4059;-.3602,1.7796,2.6329;-3.8654,-.9438,2.0782;-3.6264,-.3291,3.3348;-.1959,.7498,-1.2534;.3623,2.2289,-.4374;-1.397,1.9473,-.5984;1.0161,-1.0383,2.449;1.9693,-.2184,1.1726;.8798,-1.528,.7105;-.4208,1.2528,3.6017;.5727,2.3723,2.63;-1.2057,2.4872,2.5677;-2.7629,-.7886,3.8422;-4.5385,-.4981,3.9229;-3.4512,.7526,3.2123;4.8456,-.7248,.9918;4.4112,-2.0489,.8505;3.7583,-2.6939,1.8934;3.557,-2.0022,3.0842;4.0454,-.7141,3.2825;4.698,-.0824,2.2285;4.5104,-2.5449,-.1166;3.3555,-3.6999,1.7681;2.6952,-2.5993,4.1093;3.8699,-.2057,4.2313;5.0481,.947,2.3464;-.8058,.4534,-4.2885;-1.7853,-.5142,-4.4723;-1.4349,-1.7068,-5.0935;-.1461,-1.9394,-5.5639;.8263,-.9684,-5.3585;-1.0535,1.3776,-3.7594;-2.8056,-.3665,-4.1179;-2.4464,-2.7554,-5.2372;.086,-2.8806,-6.0619;1.8502,-1.1546,-5.6885;2.3684,-1.9041,5.0516;2.3168,-3.7395,3.9424;-2.221,-3.6561,-6.017;-3.4505,-2.6718,-4.5572;7.066,1.1604,-1.4866;6.1027,1.5501,-2.4622;8.4331,1.4996,-1.6831;8.8388,2.1756,-2.808;9.1614,1.201,-.9227;9.8943,2.4283,-2.9503;6.5585,2.2296,-3.6263;7.8886,2.5343,-3.7941;5.8354,2.5027,-4.3983;8.2167,3.0516,-4.7003;3.3857,3.1421,-3.3101;2.2682,3.5543,-4.0943;4.1891,4.1527,-2.7107;3.9319,5.4858,-2.9259;5.0193,3.8634,-2.0643;4.5664,6.2402,-2.4542;2.0364,4.941,-4.3107;2.8529,5.8898,-3.7477;1.1834,5.2387,-4.9284;2.6641,6.9531,-3.9188;-4.4786,-2.1872,-.2949;-4.452,-2.9808,-1.0595;-5.0033,-2.5673,.5954;-5.0947,-1.3684,-.7125;-2.181,-1.4176,-1.1598;-2.3173,-.3774,-1.5083;-1.1036,-1.545,-.9606;-2.4288,-2.0727,-2.0089;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650406558756</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001949107678 0.000373115101 0.018798743603 0.005337883796</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030454219 -0.000965263 0.000145191 0.000237676 0.000274002 0.000374313 0.000380896 0.000434890 0.000594031 0.000704434 0.000893643 0.001063502 0.001112479 0.001162113 0.001298822 0.001330043 0.001528027 0.001704164 0.001746113 0.001819649 0.001939399 0.002238172 0.002344540 0.002573983 0.002691882 0.003031972 0.003097907 0.003300367 0.003682755 0.003774317 0.004080293 0.004441176 0.004781103 0.004821422 0.005645932 0.005811142 0.005902262 0.006267614 0.006635994 0.007370308 0.007647978 0.007921298 0.008591788 0.009133246 0.009577934 0.010226999 0.010845265 0.011120557 0.011512017 0.011794765 0.012643780 0.013016254 0.013618476 0.013726075 0.014549701 0.015107537 0.015303045 0.015482418 0.015856987 0.016561745 0.016910104 0.017258705 0.018328228 0.018713268 0.019236671 0.020197065 0.021064712 0.021143668 0.022103135 0.022957929 0.024519645 0.024799178 0.025577405 0.026334728 0.026593663 0.028371420 0.029075292 0.030697356 0.031669127 0.031993338 0.033162741 0.033847402 0.035168561 0.035820648 0.038041057 0.038588116 0.039870783 0.040259449 0.041242324 0.044127937 0.044627198 0.044907528 0.046723834 0.049096358 0.049997999 0.050510701 0.050756108 0.051134346 0.052385457 0.052438574 0.052721194 0.052812078 0.054092387 0.054358362 0.055219489 0.055592825 0.056371191 0.056444619 0.056863399 0.057959328 0.059578218 0.060368221 0.061235443 0.061386420 0.062538278 0.063036573 0.063823512 0.064736722 0.064997361 0.066121403 0.067365062 0.068357582 0.071326273 0.072309909 0.073941060 0.075690398 0.077192366 0.083150289 0.084544881 0.086218952 0.086787059 0.087299302 0.089852213 0.090204705 0.092685250 0.094325904 0.094557002 0.096088980 0.096775416 0.097510132 0.098291556 0.099342342 0.100000083 0.101503193 0.101848531 0.102658710 0.103029623 0.103764292 0.103895723 0.106057887 0.106552763 0.106960897 0.108734874 0.109679271 0.110352627 0.111916440 0.112536968 0.114337635 0.115944550 0.118531415 0.120019326 0.120843970 0.121639781 0.123298710 0.124996197 0.126064450 0.126745891 0.131300353 0.134618471 0.135360990 0.142267088 0.143007912 0.146599334 0.146796555 0.149338489 0.151033642 0.153830160 0.154286607 0.156337547 0.159960648 0.161242334 0.172977210 0.173595099 0.178028368 0.183671855 0.184548968 0.188817247 0.189723998 0.192888448 0.193602438 0.197744576 0.199531280 0.204195433 0.206598812 0.206773170 0.209646812 0.210502378 0.214146423 0.215696672 0.217127522 0.219496135 0.224584832 0.225909870 0.231490625 0.234552809 0.234909195 0.235444500 0.244262515 0.255195781 0.256802006 0.262068122 0.267162704 0.278611253 0.282749583 0.286109934 0.289681431 0.294362078 0.303146446 0.305391349 0.305880107 0.307283198 0.314810311 0.315837193 0.321811816 0.327519715 0.330139450 0.349260830 0.350601148 0.352997875 0.355024896 0.358009478 0.361763816 0.362209230 0.379054120 0.383571079 0.390635434 0.409984799 0.424863031 0.428938645 0.450680709 0.467017707 0.469772183 0.475717465 0.481635676 0.483607089 0.489432648 0.504832049 0.512897332 0.534104587 0.565652747 0.572203177 0.590081620 0.592730217 0.603238407 0.605961522 0.640877340 0.645055996 0.646204682 0.673494003 0.675419704 0.684369869 0.691285351 0.692025097 0.698924470 0.703936853 0.715294398 0.740570949 0.750776581 0.753675184 0.761472792 0.772067076 0.778397500 0.810027188 0.810241781 0.813073443 0.820692170 0.821050340 0.825373704 0.830645933 0.832696557 0.835479977 0.843817057 0.845112723 0.846574599 0.857683326 0.864239408 0.864749915 0.872419493 0.878705686 0.883680900 0.888956178 0.891702441 0.898918527 0.901151550 0.919770050 0.922953415 0.931795815 0.934522214 0.964285539 0.975548379 0.984912628 1.000343712 1.013677175 1.025612114 1.040540511 1.048756979 1.055998957 1.064730852 1.085983967 1.087809354 1.102306745 1.105431066 1.112060194 1.114155740 1.123180939 1.135028524 1.139635121 1.170650956 1.173520425 1.178633309 1.183768356 1.187926977 1.194276435 1.216777068 1.224340702 1.270470013 1.298577956 1.316894585 1.327229178 1.330817338 1.332469680 1.333675764 1.335351828 1.341951830 1.344758114 1.358077552 1.375010447 1.381955591 1.383232675 1.390936245 1.419159499 1.422761378 1.551206966 1.660458211 1.773031027</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">117</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34172588" y3="0.03976704" z3="-0.19091746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3881256" y3="0.16371982" z3="0.41789322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64731894" y3="0.43676192" z3="-0.33998327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72439481" y3="1.22829606" z3="-2.25696254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38785734" y3="0.42225933" z3="-1.18182319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72324864" y3="0.83797842" z3="-3.65554842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62706279" y3="1.74048314" z3="-3.12638887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37108813" y3="2.58424925" z3="-4.60053491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55370904" y3="1.24246946" z3="-4.36503846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49098624" y3="2.91994684" z3="-5.15781891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92306677" y3="-0.49283593" z3="-3.44076758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09899534" y3="0.02772346" z3="-0.999373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40411321" y3="-1.11435843" z3="-2.00214505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93247838" y3="-0.98949152" z3="-1.82495987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11091026" y3="-2.43718667" z3="-1.85478805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13716689" y3="-3.60743857" z3="0.66382127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01130811" y3="-5.2699022" z3="-4.74506844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24000809" y3="-5.00734367" z3="-3.70859203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83714036" y3="-4.30541042" z3="-1.09226499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78624926" y3="-4.60331554" z3="-2.85619869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55752109" y3="-5.08677687" z3="-3.25261919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85688688" y3="-4.73027395" z3="-1.9401427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4990737" y3="-4.2665794" z3="-1.53176084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82107368" y3="-4.53253289" z3="-3.20189185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35786855" y3="-5.39724021" z3="-3.92817023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89398357" y3="-4.76093827" z3="-1.59865678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02581971" y3="-3.85236802" z3="0.22705675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16557965" y3="-3.64104807" z3="0.87334573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05293175" y3="-4.10554184" z3="0.4408144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15946788" y3="-3.50531409" z3="2.34030785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21645263" y3="-3.32106848" z3="5.13823351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3549919" y3="-3.7115093" z3="3.04430044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99218748" y3="-3.2128401" z3="3.06142664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01809245" y3="-3.12144689" z3="4.45006004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38254974" y3="-3.62168878" z3="4.43316666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26992053" y3="-3.95248002" z3="2.49645943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03324033" y3="-3.07768317" z3="2.55627704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08918216" y3="-2.91421015" z3="4.98865431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32006473" y3="-3.79399719" z3="4.96870098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23601125" y3="-3.2576809" z3="6.22976703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41942837" y3="-3.90435949" z3="-0.62793249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18232593" y3="-3.40590544" z3="-1.08204505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51460823" y3="0.23678437" z3="-4.70592642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0797284" y3="-1.71624536" z3="0.01650471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89699272" y3="-0.96415427" z3="1.17668187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83130077" y3="-0.31550838" z3="1.50291745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36367099" y3="0.56749246" z3="1.20834954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43395858" y3="1.45222548" z3="-0.42631593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99250816" y3="-0.68115878" z3="1.40657297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36813173" y3="1.77335231" z3="2.64158269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86733679" y3="-0.952076" z3="2.07977712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63317699" y3="-0.33800135" z3="3.33662903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20309117" y3="0.75222645" z3="-1.24799136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34819938" y3="2.23391157" z3="-0.42939808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40876791" y3="1.9451534" z3="-0.59016258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01420017" y3="-1.0409238" z3="2.44907188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96744997" y3="-0.219252" z3="1.17223824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87232964" y3="-1.52733243" z3="0.70984673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42597407" y3="1.24345424" z3="3.60879841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56406108" y3="2.36737485" z3="2.63917892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21476864" y3="2.48032169" z3="2.57972088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77014654" y3="-0.79491988" z3="3.8462165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54571454" y3="-0.51103193" z3="3.92181116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46227718" y3="0.74390157" z3="3.21495078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84450217" y3="-0.71861817" z3="0.99191445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41117442" y3="-2.04314741" z3="0.8518589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75885467" y3="-2.68785124" z3="1.89553334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55663572" y3="-1.99516835" z3="3.08570307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04292325" y3="-0.70623311" z3="3.28219043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6953667" y3="-0.07509088" z3="2.22778886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5103301" y3="-2.53977813" z3="-0.11521385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35707695" y3="-3.6942757" z3="1.77126093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69452689" y3="-2.59208531" z3="4.11069187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86581187" y3="-0.19689149" z3="4.22993685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04404371" y3="0.95465807" z3="2.34421054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80424258" y3="0.45913018" z3="-4.28648199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78463601" y3="-0.50707437" z3="-4.46657392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43562645" y3="-1.70027301" z3="-5.08911855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14747063" y3="-1.93284537" z3="-5.56107595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82568239" y3="-0.96344168" z3="-5.35981191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04978413" y3="1.38353276" z3="-3.757596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80521136" y3="-0.35986948" z3="-4.110898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44801756" y3="-2.74922902" z3="-5.23188626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08371433" y3="-2.87436874" z3="-6.06008698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84771617" y3="-1.15204124" z3="-5.69011819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36603421" y3="-1.89598742" z3="5.05137095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3163338" y3="-3.73308679" z3="3.9441581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22480086" y3="-3.64978373" z3="-6.01223374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45030372" y3="-2.66413003" z3="-4.55092461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06878946" y3="1.16274604" z3="-1.48709517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10626773" y3="1.55038024" z3="-2.46443948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43627307" y3="1.49704407" z3="-1.68435517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84323268" y3="2.16539998" z3="-2.81213299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1641222" y3="1.20037786" z3="-0.92266636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89839789" y3="2.41021547" z3="-2.95612446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56359914" y3="2.22401519" z3="-3.63070503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89388515" y3="2.52184867" z3="-3.79990522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84101437" y3="2.49513214" z3="-4.4040069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22290266" y3="3.03278268" z3="-4.70851652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39264053" y3="3.14459349" z3="-3.31767533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27561666" y3="3.55768399" z3="-4.10214987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19802162" y3="4.15535329" z3="-2.72020541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9437713" y3="5.48863879" z3="-2.93820567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02773073" y3="3.8659765" z3="-2.07335938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5780986" y3="6.24493116" z3="-2.46531588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04735723" y3="4.94389085" z3="-4.32224055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86575137" y3="5.89267815" z3="-3.76104508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19457394" y3="5.24200959" z3="-4.94007636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67858217" y3="6.95650023" z3="-3.93368538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48042452" y3="-2.19361288" z3="-0.29415846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45719201" y3="-2.98867589" z3="-1.06052229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00474356" y3="-2.57296612" z3="0.59859091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0967669" y3="-1.37378237" z3="-0.70976824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18101998" y3="-1.42119868" z3="-1.15768506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31794706" y3="-0.37966466" z3="-1.50389322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10421226" y3="-1.54747686" z3="-0.95605368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42546909" y3="-2.07468725" z3="-2.00818831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3417,.0398,-.1909;7.3881,.1637,.4179;6.6473,.4368,-.34;4.7244,1.2283,-2.257;4.3879,.4223,-1.1818;2.7232,.838,-3.6555;3.6271,1.7405,-3.1264;1.3711,2.5842,-4.6005;1.5537,1.2425,-4.365;.491,2.9199,-5.1578;2.9231,-.4928,-3.4408;3.099,.0277,-.9994;2.4041,-1.1144,-2.0021;.9325,-.9895,-1.825;3.1109,-2.4372,-1.8548;-.1372,-3.6074,.6638;-.0113,-5.2699,-4.7451;-.24,-5.0073,-3.7086;-.8371,-4.3054,-1.0923;.7862,-4.6033,-2.8562;-1.5575,-5.0868,-3.2526;-1.8569,-4.7303,-1.9401;.4991,-4.2666,-1.5318;1.8211,-4.5325,-3.2019;-2.3579,-5.3972,-3.9282;-2.894,-4.7609,-1.5987;-1.0258,-3.8524,.2271;-2.1656,-3.641,.8733;-3.0529,-4.1055,.4408;-2.1595,-3.5053,2.3403;-2.2165,-3.3211,5.1382;-3.355,-3.7115,3.0443;-.9922,-3.2128,3.0614;-1.0181,-3.1214,4.4501;-3.3825,-3.6217,4.4332;-4.2699,-3.9525,2.4965;-.0332,-3.0777,2.5563;-.0892,-2.9142,4.9887;-4.3201,-3.794,4.9687;-2.236,-3.2577,6.2298;1.4194,-3.9044,-.6279;2.1823,-3.4059,-1.082;.5146,.2368,-4.7059;-3.0797,-1.7162,.0165;-2.897,-.9642,1.1767;-1.8313,-.3155,1.5029;-.3637,.5675,1.2083;-.434,1.4522,-.4263;.9925,-.6812,1.4066;-.3681,1.7734,2.6416;-3.8673,-.9521,2.0798;-3.6332,-.338,3.3366;-.2031,.7522,-1.248;.3482,2.2339,-.4294;-1.4088,1.9452,-.5902;1.0142,-1.0409,2.4491;1.9674,-.2193,1.1722;.8723,-1.5273,.7098;-.426,1.2435,3.6088;.5641,2.3674,2.6392;-1.2148,2.4803,2.5797;-2.7701,-.7949,3.8462;-4.5457,-.511,3.9218;-3.4623,.7439,3.215;4.8445,-.7186,.9919;4.4112,-2.0431,.8519;3.7589,-2.6879,1.8955;3.5566,-1.9952,3.0857;4.0429,-.7062,3.2822;4.6954,-.0751,2.2278;4.5103,-2.5398,-.1152;3.3571,-3.6943,1.7713;2.6945,-2.5921,4.1107;3.8658,-.1969,4.2299;5.044,.9547,2.3442;-.8042,.4591,-4.2865;-1.7846,-.5071,-4.4666;-1.4356,-1.7003,-5.0891;-.1475,-1.9328,-5.5611;.8257,-.9634,-5.3598;-1.0498,1.3835,-3.7576;-2.8052,-.3599,-4.1109;-2.448,-2.7492,-5.2319;.0837,-2.8744,-6.0601;1.8477,-1.152,-5.6901;2.366,-1.896,5.0514;2.3163,-3.7331,3.9442;-2.2248,-3.6498,-6.0122;-3.4503,-2.6641,-4.5509;7.0688,1.1627,-1.4871;6.1063,1.5504,-2.4644;8.4363,1.497,-1.6844;8.8432,2.1654,-2.8121;9.1641,1.2004,-.9227;9.8984,2.4102,-2.9561;6.5636,2.224,-3.6307;7.8939,2.5218,-3.7999;5.841,2.4951,-4.404;8.2229,3.0328,-4.7085;3.3926,3.1446,-3.3177;2.2756,3.5577,-4.1021;4.198,4.1554,-2.7202;3.9438,5.4886,-2.9382;5.0277,3.866,-2.0734;4.5781,6.2449,-2.4653;2.0474,4.9439,-4.3222;2.8658,5.8927,-3.761;1.1946,5.242,-4.9401;2.6786,6.9565,-3.9337;-4.4804,-2.1936,-.2942;-4.4572,-2.9887,-1.0605;-5.0047,-2.573,.5986;-5.0968,-1.3738,-.7098;-2.181,-1.4212,-1.1577;-2.3179,-.3797,-1.5039;-1.1042,-1.5475,-.9561;-2.4255,-2.0747,-2.0082;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650408482434</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001959510280 0.000390115924 0.015714267128 0.005337171222</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030454221 -0.001014733 0.000144900 0.000238488 0.000274500 0.000375595 0.000381721 0.000439114 0.000594761 0.000704586 0.000896828 0.001063541 0.001138859 0.001162749 0.001299994 0.001339366 0.001530253 0.001707746 0.001746212 0.001819362 0.001940847 0.002243280 0.002344682 0.002576757 0.002701121 0.003034413 0.003098614 0.003304932 0.003685206 0.003774709 0.004081427 0.004456944 0.004787942 0.004838244 0.005677269 0.005829254 0.005903364 0.006282207 0.006637313 0.007383659 0.007661758 0.007929276 0.008646745 0.009152942 0.009577708 0.010255414 0.010846381 0.011131649 0.011515628 0.011798762 0.012648497 0.013026706 0.013683491 0.013768894 0.014556794 0.015121125 0.015305827 0.015482772 0.015859155 0.016564279 0.016942279 0.017259437 0.018347521 0.018714322 0.019247924 0.020198301 0.021067030 0.021143891 0.022103099 0.022968063 0.024603817 0.025000950 0.025578072 0.026334574 0.026594292 0.028396168 0.029089127 0.030708988 0.031670186 0.032008240 0.033166337 0.033847513 0.035238152 0.035821776 0.038041264 0.038592093 0.039875719 0.040266019 0.041242254 0.044128621 0.044630925 0.044907419 0.046726941 0.049096505 0.049998007 0.050517578 0.050761918 0.051136252 0.052398042 0.052444871 0.052725829 0.052814929 0.054093302 0.054373854 0.055220626 0.055609391 0.056372103 0.056447207 0.056867885 0.057964694 0.059596396 0.060388663 0.061241080 0.061408464 0.062538707 0.063053754 0.063859736 0.064736579 0.065003491 0.066134181 0.067367839 0.068358496 0.071332187 0.072352652 0.073948464 0.075690582 0.077227280 0.083167045 0.084544859 0.086226609 0.086790422 0.087320046 0.089858307 0.090206326 0.092686585 0.094325935 0.094557016 0.096099523 0.096786188 0.097518275 0.098302977 0.099342430 0.100001999 0.101518274 0.101856934 0.102661503 0.103037750 0.103780407 0.103895984 0.106125923 0.106553508 0.106966793 0.108734746 0.109694439 0.110355183 0.111936508 0.112539094 0.114352062 0.115949778 0.118564657 0.120039976 0.120850787 0.121640062 0.123308762 0.124998136 0.126066266 0.126752942 0.131315105 0.134618801 0.135365427 0.142273364 0.143030154 0.146605680 0.146795781 0.149341489 0.151061289 0.153863630 0.154309330 0.156338573 0.159960258 0.161280977 0.173003217 0.173595825 0.178030790 0.183672687 0.184549211 0.188831661 0.189729173 0.192890968 0.193623029 0.197756507 0.199563591 0.204224073 0.206602829 0.206773435 0.209646833 0.210503798 0.214146136 0.215738888 0.217128641 0.219511058 0.224594426 0.225909969 0.231491273 0.234566963 0.234919742 0.235449969 0.244267893 0.255214824 0.256806698 0.262095499 0.267181205 0.278622910 0.282749681 0.286110879 0.289684240 0.294364145 0.303164742 0.305391724 0.305883099 0.307288112 0.314856620 0.315927806 0.321816052 0.327534537 0.330184331 0.349307050 0.350698859 0.353077280 0.355031754 0.358188049 0.361774201 0.362209465 0.379054106 0.383614485 0.390677360 0.409985696 0.424875237 0.429059283 0.450697793 0.467018446 0.469808124 0.475729733 0.481687523 0.483610435 0.489435330 0.504836232 0.512916719 0.534104999 0.565652748 0.572209980 0.590175943 0.592766174 0.603307182 0.605973151 0.641060581 0.645056207 0.646207696 0.673500440 0.675421049 0.684379298 0.691285419 0.692032088 0.698962467 0.703936897 0.715295110 0.740571479 0.750780167 0.753697334 0.761814728 0.772067551 0.778414276 0.810051295 0.810295681 0.813077810 0.820697796 0.821050523 0.825387572 0.830646034 0.832724690 0.835480618 0.844113044 0.845115542 0.846654632 0.857710723 0.864258232 0.864750915 0.872428820 0.878709195 0.883682655 0.888956212 0.891702848 0.898958311 0.901185140 0.919808073 0.922989085 0.931845162 0.934522260 0.964318841 0.975553046 0.984921849 1.000344310 1.013679840 1.025712662 1.040541141 1.048771857 1.056068616 1.064782539 1.086000139 1.087865902 1.102329941 1.105459388 1.112060509 1.114182899 1.123182869 1.135028644 1.139678384 1.170651060 1.173572124 1.178692377 1.183817365 1.187926920 1.194278958 1.216788160 1.224401102 1.270484097 1.298655478 1.316994439 1.327276140 1.330817361 1.332500421 1.333717389 1.335352580 1.341952558 1.344759846 1.358101087 1.375028793 1.381956404 1.383242024 1.390981283 1.419185212 1.422988090 1.551226120 1.660503861 1.773047928</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">118</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34116813" y3="0.04393459" z3="-0.19104497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38730049" y3="0.16023386" z3="0.4159988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6473172" y3="0.43400482" z3="-0.34227601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72682563" y3="1.23005547" z3="-2.25929203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38847267" y3="0.42753922" z3="-1.18230891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72545649" y3="0.84076304" z3="-3.65754534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63048756" y3="1.74307462" z3="-3.12954281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37668228" y3="2.58678239" z3="-4.60703539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5568244" y3="1.24523018" z3="-4.36869736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49722014" y3="2.92286535" z3="-5.16508803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9225585" y3="-0.48960074" z3="-3.43942179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09887319" y3="0.03713039" z3="-0.99930785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40269178" y3="-1.10629548" z3="-1.99940688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9310994" y3="-0.97959709" z3="-1.82320503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10789826" y3="-2.42947123" z3="-1.84860254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13725836" y3="-3.61193224" z3="0.66612705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00954475" y3="-5.26041537" z3="-4.74717567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2382996" y3="-5.00115354" z3="-3.70995596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83698778" y3="-4.30565572" z3="-1.09179109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.786494" y3="-4.59573132" z3="-2.85714861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55494667" y3="-5.08579344" z3="-3.25329292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8551031" y3="-4.73253778" z3="-1.9400606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49958683" y3="-4.2635933" z3="-1.53162943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81957024" y3="-4.51850611" z3="-3.20223033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3539795" y3="-5.39780054" z3="-3.92905643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89245475" y3="-4.7660898" z3="-1.59812863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02629476" y3="-3.85549017" z3="0.22842939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1662698" y3="-3.64569816" z3="0.87479796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05316844" y3="-4.11034939" z3="0.44148752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16063308" y3="-3.51089387" z3="2.34174663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21779369" y3="-3.32870532" z3="5.13974441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35576726" y3="-3.72007947" z3="3.04544424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99398373" y3="-3.21622198" z3="3.06303517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01988988" y3="-3.12593241" z3="4.45178678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38360806" y3="-3.63092778" z3="4.43436198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27038112" y3="-3.96240881" z3="2.4973298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03541758" y3="-3.07834254" z3="2.55790977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0911018" y3="-2.9173388" z3="4.99053841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32103949" y3="-3.80511987" z3="4.96976027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.237475" y3="-3.26601673" z3="6.23134749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42176388" y3="-3.90335012" z3="-0.6268904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17930957" y3="-3.39916009" z3="-1.07868299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51600878" y3="0.24092178" z3="-4.70648154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0814988" y3="-1.72043971" z3="0.02006378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90383156" y3="-0.9694628" z3="1.18037764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84309491" y3="-0.31695682" z3="1.50980844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37051873" y3="0.56327394" z3="1.21294837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44367245" y3="1.45229952" z3="-0.4194055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98778793" y3="-0.68383954" z3="1.40646275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37291551" y3="1.76724168" z3="2.64882588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87548354" y3="-0.96130299" z3="2.08160142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64098934" y3="-0.34813218" z3="3.34015273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20657853" y3="0.7568853" z3="-1.2419094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33494183" y3="2.23822649" z3="-0.41888229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4207023" y3="1.93945119" z3="-0.58431258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0132601" y3="-1.04282107" z3="2.44860724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95794959" y3="-0.2163563" z3="1.17048423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87193948" y3="-1.52892126" z3="0.70954991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43009957" y3="1.23535571" z3="3.61527529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.557968" y3="2.36272873" z3="2.64691755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22067189" y3="2.47269316" z3="2.58895962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77633364" y3="-0.80565662" z3="3.84809284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5537423" y3="-0.5216859" z3="3.92634337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46970384" y3="0.73445054" z3="3.22031382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8427374" y3="-0.71167794" z3="0.9927161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41188654" y3="-2.03707734" z3="0.85435782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75910281" y3="-2.68123821" z3="1.89791844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55442007" y3="-1.98715412" z3="3.08659045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03877578" y3="-0.6971086" z3="3.28196667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69099634" y3="-0.06636091" z3="2.22717808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51414422" y3="-2.53517273" z3="-0.1109894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35915577" y3="-3.68850838" z3="1.77470722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69294335" y3="-2.58421559" z3="4.11204145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86068323" y3="-0.18694118" z3="4.22932637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03828496" y3="0.96411442" z3="2.34271573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80129844" y3="0.4644556" z3="-4.28495035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78251134" y3="-0.50208817" z3="-4.4637548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43586494" y3="-1.69527851" z3="-5.08585578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14923198" y3="-1.92950814" z3="-5.56114775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82491308" y3="-0.95972333" z3="-5.36001331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04587878" y3="1.3891692" z3="-3.7558198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80098376" y3="-0.35290714" z3="-4.10558108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44922378" y3="-2.74237251" z3="-5.22628282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08009771" y3="-2.87106431" z3="-6.05979526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84781963" y3="-1.14671586" z3="-5.69374143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36607306" y3="-1.88845655" z3="5.05439603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31449072" y3="-3.7251851" z3="3.94505468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22841271" y3="-3.64287156" z3="-6.00754326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4501455" y3="-2.65720074" z3="-4.54230209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0703958" y3="1.15604799" z3="-1.49119776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10909275" y3="1.54655443" z3="-2.46833534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43875364" y3="1.48627818" z3="-1.68972497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84777009" y3="2.15581588" z3="-2.81779557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16545566" y3="1.18732822" z3="-0.92812889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90425484" y3="2.40064405" z3="-2.96202804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56817321" y3="2.21942467" z3="-3.63541559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89968816" y3="2.51598377" z3="-3.80511425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84641752" y3="2.49316349" z3="-4.40837788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23035402" y3="3.02852098" z3="-4.71376944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39846768" y3="3.14725314" z3="-3.32351298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2826213" y3="3.56029601" z3="-4.10963058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20570445" y3="4.15767643" z3="-2.72798324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95426438" y3="5.49086807" z3="-2.94918212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03470912" y3="3.86796721" z3="-2.08037643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59123868" y3="6.2455021" z3="-2.47987132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05696592" y3="4.94684615" z3="-4.33245192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8773478" y3="5.89512734" z3="-3.77338993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20551037" y3="5.2449538" z3="-4.95199073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6931252" y3="6.95842738" z3="-3.94939964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47963561" y3="-2.20018898" z3="-0.29454155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45027047" y3="-2.99160125" z3="-1.06143146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00488049" y3="-2.58386196" z3="0.59425032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09676663" y3="-1.38134674" z3="-0.71041609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18148507" y3="-1.42312733" z3="-1.15283773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31985382" y3="-0.38284212" z3="-1.49954853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10396582" y3="-1.54855084" z3="-0.95175729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42598404" y3="-2.07676345" z3="-2.00409343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3412,.0439,-.191;7.3873,.1602,.416;6.6473,.434,-.3423;4.7268,1.2301,-2.2593;4.3885,.4275,-1.1823;2.7255,.8408,-3.6575;3.6305,1.7431,-3.1295;1.3767,2.5868,-4.607;1.5568,1.2452,-4.3687;.4972,2.9229,-5.1651;2.9226,-.4896,-3.4394;3.0989,.0371,-.9993;2.4027,-1.1063,-1.9994;.9311,-.9796,-1.8232;3.1079,-2.4295,-1.8486;-.1373,-3.6119,.6661;-.0095,-5.2604,-4.7472;-.2383,-5.0012,-3.71;-.837,-4.3057,-1.0918;.7865,-4.5957,-2.8571;-1.5549,-5.0858,-3.2533;-1.8551,-4.7325,-1.9401;.4996,-4.2636,-1.5316;1.8196,-4.5185,-3.2022;-2.354,-5.3978,-3.9291;-2.8925,-4.7661,-1.5981;-1.0263,-3.8555,.2284;-2.1663,-3.6457,.8748;-3.0532,-4.1103,.4415;-2.1606,-3.5109,2.3417;-2.2178,-3.3287,5.1397;-3.3558,-3.7201,3.0454;-.994,-3.2162,3.063;-1.0199,-3.1259,4.4518;-3.3836,-3.6309,4.4344;-4.2704,-3.9624,2.4973;-.0354,-3.0783,2.5579;-.0911,-2.9173,4.9905;-4.321,-3.8051,4.9698;-2.2375,-3.266,6.2313;1.4218,-3.9034,-.6269;2.1793,-3.3992,-1.0787;.516,.2409,-4.7065;-3.0815,-1.7204,.0201;-2.9038,-.9695,1.1804;-1.8431,-.317,1.5098;-.3705,.5633,1.2129;-.4437,1.4523,-.4194;.9878,-.6838,1.4065;-.3729,1.7672,2.6488;-3.8755,-.9613,2.0816;-3.641,-.3481,3.3402;-.2066,.7569,-1.2419;.3349,2.2382,-.4189;-1.4207,1.9395,-.5843;1.0133,-1.0428,2.4486;1.9579,-.2164,1.1705;.8719,-1.5289,.7095;-.4301,1.2354,3.6153;.558,2.3627,2.6469;-1.2207,2.4727,2.589;-2.7763,-.8057,3.8481;-4.5537,-.5217,3.9263;-3.4697,.7345,3.2203;4.8427,-.7117,.9927;4.4119,-2.0371,.8544;3.7591,-2.6812,1.8979;3.5544,-1.9872,3.0866;4.0388,-.6971,3.282;4.691,-.0664,2.2272;4.5141,-2.5352,-.111;3.3592,-3.6885,1.7747;2.6929,-2.5842,4.112;3.8607,-.1869,4.2293;5.0383,.9641,2.3427;-.8013,.4645,-4.285;-1.7825,-.5021,-4.4638;-1.4359,-1.6953,-5.0859;-.1492,-1.9295,-5.5611;.8249,-.9597,-5.36;-1.0459,1.3892,-3.7558;-2.801,-.3529,-4.1056;-2.4492,-2.7424,-5.2263;.0801,-2.8711,-6.0598;1.8478,-1.1467,-5.6937;2.3661,-1.8885,5.0544;2.3145,-3.7252,3.9451;-2.2284,-3.6429,-6.0075;-3.4501,-2.6572,-4.5423;7.0704,1.156,-1.4912;6.1091,1.5466,-2.4683;8.4388,1.4863,-1.6897;8.8478,2.1558,-2.8178;9.1655,1.1873,-.9281;9.9043,2.4006,-2.962;6.5682,2.2194,-3.6354;7.8997,2.516,-3.8051;5.8464,2.4932,-4.4084;8.2304,3.0285,-4.7138;3.3985,3.1473,-3.3235;2.2826,3.5603,-4.1096;4.2057,4.1577,-2.728;3.9543,5.4909,-2.9492;5.0347,3.868,-2.0804;4.5912,6.2455,-2.4799;2.057,4.9468,-4.3325;2.8773,5.8951,-3.7734;1.2055,5.245,-4.952;2.6931,6.9584,-3.9494;-4.4796,-2.2002,-.2945;-4.4503,-2.9916,-1.0614;-5.0049,-2.5839,.5943;-5.0968,-1.3813,-.7104;-2.1815,-1.4231,-1.1528;-2.3199,-.3828,-1.4995;-1.104,-1.5486,-.9518;-2.426,-2.0768,-2.0041;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411399667</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001809267034 0.000383154525 0.017955689688 0.005336948368</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030454265 -0.000960380 0.000148244 0.000238504 0.000274421 0.000375587 0.000382902 0.000440151 0.000595099 0.000705812 0.000902492 0.001064193 0.001149823 0.001164993 0.001300818 0.001340960 0.001531806 0.001716659 0.001746219 0.001824380 0.001945952 0.002258823 0.002345227 0.002577091 0.002705914 0.003034491 0.003105277 0.003310049 0.003686648 0.003777164 0.004083852 0.004470054 0.004791108 0.004844389 0.005685252 0.005844020 0.005905112 0.006292917 0.006637116 0.007391763 0.007677846 0.007937495 0.008690497 0.009157164 0.009585210 0.010309943 0.010846407 0.011168096 0.011515699 0.011804585 0.012652478 0.013033123 0.013693790 0.013839235 0.014565417 0.015132468 0.015313853 0.015483411 0.015860147 0.016564977 0.016944989 0.017259571 0.018361000 0.018716441 0.019256841 0.020198292 0.021070936 0.021144416 0.022105503 0.022985872 0.024644829 0.025275569 0.025586961 0.026336506 0.026596567 0.028413939 0.029098684 0.030735028 0.031670423 0.032020776 0.033166608 0.033848278 0.035319188 0.035821739 0.038041362 0.038595904 0.039876843 0.040277754 0.041243550 0.044128804 0.044640199 0.044907185 0.046741857 0.049096531 0.049998042 0.050517952 0.050764463 0.051136735 0.052404923 0.052449875 0.052726314 0.052816772 0.054093347 0.054395503 0.055222271 0.055619300 0.056372381 0.056452148 0.056873284 0.057967590 0.059600513 0.060406721 0.061244318 0.061435341 0.062538700 0.063066820 0.063914499 0.064736849 0.065009373 0.066148770 0.067367736 0.068358914 0.071336659 0.072387641 0.073955658 0.075693232 0.077261057 0.083176223 0.084545463 0.086240390 0.086790820 0.087334430 0.089863026 0.090212999 0.092690134 0.094335959 0.094557212 0.096113411 0.096789796 0.097527760 0.098317666 0.099342726 0.100004681 0.101530383 0.101868900 0.102662300 0.103055791 0.103786088 0.103896127 0.106152999 0.106562062 0.106967873 0.108736246 0.109701003 0.110357264 0.111959511 0.112539427 0.114362553 0.115952837 0.118586090 0.120070133 0.120851274 0.121640146 0.123329503 0.125003508 0.126067070 0.126755703 0.131325800 0.134621445 0.135367342 0.142274735 0.143068472 0.146608200 0.146808294 0.149343117 0.151091947 0.153881669 0.154314786 0.156340948 0.159962993 0.161331208 0.173010466 0.173595955 0.178030810 0.183672844 0.184549679 0.188833318 0.189736575 0.192890892 0.193631407 0.197759641 0.199588785 0.204246591 0.206606086 0.206774264 0.209646841 0.210507417 0.214148288 0.215788645 0.217129070 0.219513272 0.224596573 0.225912729 0.231493498 0.234572236 0.234924728 0.235455206 0.244270226 0.255230645 0.256808798 0.262101079 0.267194400 0.278625078 0.282749740 0.286112079 0.289688143 0.294369337 0.303182448 0.305392011 0.305885282 0.307295899 0.314886442 0.316028324 0.321820192 0.327550509 0.330263695 0.349349576 0.350825633 0.353159794 0.355033647 0.358477186 0.361779546 0.362209444 0.379054435 0.383654471 0.390755424 0.409987185 0.424876503 0.429115245 0.450705278 0.467021125 0.469824038 0.475742608 0.481738667 0.483615517 0.489435895 0.504857698 0.512936929 0.534114023 0.565656923 0.572210289 0.590268414 0.592781915 0.603440493 0.605992291 0.641220517 0.645058400 0.646207927 0.673526403 0.675432514 0.684385110 0.691285485 0.692036938 0.698982887 0.703936993 0.715295524 0.740572508 0.750781472 0.753718394 0.762125598 0.772071007 0.778420131 0.810064717 0.810383360 0.813090875 0.820698633 0.821050776 0.825401554 0.830658525 0.832794066 0.835492324 0.844376862 0.845124428 0.846804660 0.857740634 0.864263046 0.864753132 0.872442859 0.878713457 0.883683006 0.888958289 0.891703251 0.899002273 0.901217100 0.919853818 0.923021782 0.931892559 0.934522503 0.964345735 0.975556693 0.984927635 1.000344323 1.013681384 1.025811867 1.040542577 1.048791072 1.056112151 1.064823388 1.086014199 1.087928767 1.102363865 1.105474916 1.112064375 1.114224955 1.123182887 1.135028645 1.139727481 1.170651149 1.173588477 1.178831120 1.183865758 1.187929122 1.194281828 1.216813101 1.224444161 1.270613630 1.298718790 1.317056757 1.327310265 1.330831315 1.332501806 1.333775005 1.335353594 1.341989419 1.344761106 1.358123864 1.375041208 1.381985176 1.383250154 1.391032114 1.419211046 1.423096038 1.551234850 1.660522873 1.773053561</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">119</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34104717" y3="0.04728367" z3="-0.19168757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38819501" y3="0.16237017" z3="0.41549528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64851225" y3="0.43758155" z3="-0.34252658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7289128" y3="1.23333935" z3="-2.26106723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38889028" y3="0.43194232" z3="-1.18314425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7270439" y3="0.84545208" z3="-3.6585005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63398106" y3="1.74656186" z3="-3.13284623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38133173" y3="2.5922414" z3="-4.61119026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55916341" y3="1.25109844" z3="-4.36977031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50246607" y3="2.9286697" z3="-5.16994663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9221769" y3="-0.48525941" z3="-3.43905041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09850581" y3="0.04313771" z3="-0.99926763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40104657" y3="-1.10039695" z3="-1.99851362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92968972" y3="-0.97183205" z3="-1.82249202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10549314" y3="-2.42411127" z3="-1.84695491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13928788" y3="-3.61347442" z3="0.66867915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00729158" y3="-5.25344043" z3="-4.7466953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23678461" y3="-4.99631142" z3="-3.70901414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83676392" y3="-4.30715239" z3="-1.08988154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78742788" y3="-4.5893251" z3="-2.85586714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55342042" y3="-5.08507609" z3="-3.25248331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85443149" y3="-4.73474109" z3="-1.93860295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49925157" y3="-4.25956318" z3="-1.52990955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82109669" y3="-4.51020443" z3="-3.20199239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35202976" y3="-5.39776888" z3="-3.928731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89166171" y3="-4.77141853" z3="-1.59659373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02712914" y3="-3.85911024" z3="0.23087621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16769374" y3="-3.6501601" z3="0.8765469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05395743" y3="-4.11551131" z3="0.44298884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16231467" y3="-3.51652327" z3="2.3437347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21961209" y3="-3.33656864" z3="5.14197245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35716519" y3="-3.72774672" z3="3.04728646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99598503" y3="-3.22086669" z3="3.06536032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02199306" y3="-3.13155561" z3="4.45416162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3848472" y3="-3.640067" z3="4.43635402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27143862" y3="-3.97084674" z3="2.4989587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0374364" y3="-3.08142438" z3="2.56044905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09360363" y3="-2.92166184" z3="4.99291919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32175674" y3="-3.81641251" z3="4.97160594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23920549" y3="-3.27499756" z3="6.23366776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41783875" y3="-3.89548878" z3="-0.62494658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1787038" y3="-3.39267892" z3="-1.07740132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51760762" y3="0.24632084" z3="-4.70710496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08263274" y3="-1.72599881" z3="0.02142827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90489196" y3="-0.97596695" z3="1.18383516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84187985" y3="-0.32489315" z3="1.51433936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37607524" y3="0.56123579" z3="1.2186076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45403736" y3="1.45342982" z3="-0.41153883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98350625" y3="-0.68534058" z3="1.40577733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3781373" y3="1.75962428" z3="2.65810231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87723239" y3="-0.96899882" z3="2.08478316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64839058" y3="-0.35644921" z3="3.34322453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21582721" y3="0.7593706" z3="-1.23646339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32063167" y3="2.24291322" z3="-0.41000092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43367968" y3="1.93777891" z3="-0.57367417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01043158" y3="-1.0481644" z3="2.44702861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95698995" y3="-0.22070671" z3="1.16910959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86265716" y3="-1.5299366" z3="0.70729042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43291617" y3="1.22441074" z3="3.62257564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55355925" y3="2.35461153" z3="2.65642962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22580014" y3="2.46581702" z3="2.60212443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78479284" y3="-0.81047034" z3="3.85395763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56140496" y3="-0.53438266" z3="3.92601282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48165888" y3="0.7262797" z3="3.22382765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84121445" y3="-0.70729475" z3="0.99251282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41064732" y3="-2.03311018" z3="0.85515697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75793437" y3="-2.67633236" z3="1.89934164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55259673" y3="-1.98090844" z3="3.08743578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0353478" y3="-0.69002765" z3="3.28115208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68816419" y3="-0.06028877" z3="2.22620575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51255861" y3="-2.53213221" z3="-0.11041928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35856173" y3="-3.68404031" z3="1.77706014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69120906" y3="-2.57768044" z3="4.11311629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85563571" y3="-0.17843308" z3="4.22718733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03459703" y3="0.97061037" z3="2.34063444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79944812" y3="0.46975086" z3="-4.28297703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78131902" y3="-0.49612909" z3="-4.45999616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43561539" y3="-1.68943632" z3="-5.08424605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14939194" y3="-1.92311113" z3="-5.5609788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82547705" y3="-0.95427814" z3="-5.36239127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04223742" y3="1.39439216" z3="-3.75281186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80042649" y3="-0.34835678" z3="-4.10008881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44948371" y3="-2.73751098" z3="-5.22365036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07901617" y3="-2.86475462" z3="-6.06082058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84576261" y3="-1.14436784" z3="-5.69572953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36062389" y3="-1.88109371" z3="5.0522146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31608606" y3="-3.71952024" z3="3.94890202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22935789" y3="-3.63813988" z3="-6.00482674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45002653" y3="-2.65225729" z3="-4.53954001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07315903" y3="1.15861791" z3="-1.49203808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11231919" y3="1.54844564" z3="-2.47009559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44246892" y3="1.48543347" z3="-1.69113532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85259127" y3="2.14805208" z3="-2.82133798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.168835" y3="1.18609159" z3="-0.92918718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90928267" y3="2.38793722" z3="-2.96651483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57277515" y3="2.21573978" z3="-3.63895408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90463604" y3="2.50655289" z3="-3.80973682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85131508" y3="2.48820093" z3="-4.41283793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23605978" y3="3.0124009" z3="-4.72027395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40549264" y3="3.15021859" z3="-3.33142273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29010132" y3="3.56391419" z3="-4.11795904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21566161" y3="4.1600786" z3="-2.73992865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9670536" y3="5.49325017" z3="-2.96494344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04411509" y3="3.87057998" z3="-2.09154308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60591056" y3="6.24813357" z3="-2.49782701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06728907" y3="4.95013541" z3="-4.34463045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89018884" y3="5.89799909" z3="-3.78904157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21537681" y3="5.24905361" z3="-4.96334629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70740847" y3="6.96166174" z3="-3.96710349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48064656" y3="-2.20622341" z3="-0.29498103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45164592" y3="-2.99726941" z3="-1.06416027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00610113" y3="-2.59143596" z3="0.59392307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0984096" y3="-1.38693101" z3="-0.70939186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18127648" y3="-1.42640393" z3="-1.14971455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31930435" y3="-0.3843826" z3="-1.49418235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10482379" y3="-1.55068189" z3="-0.94557039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42228612" y3="-2.07851835" z3="-2.0021991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.341,.0473,-.1917;7.3882,.1624,.4155;6.6485,.4376,-.3425;4.7289,1.2333,-2.2611;4.3889,.4319,-1.1831;2.727,.8455,-3.6585;3.634,1.7466,-3.1328;1.3813,2.5922,-4.6112;1.5592,1.2511,-4.3698;.5025,2.9287,-5.1699;2.9222,-.4853,-3.4391;3.0985,.0431,-.9993;2.401,-1.1004,-1.9985;.9297,-.9718,-1.8225;3.1055,-2.4241,-1.847;-.1393,-3.6135,.6687;-.0073,-5.2534,-4.7467;-.2368,-4.9963,-3.709;-.8368,-4.3072,-1.0899;.7874,-4.5893,-2.8559;-1.5534,-5.0851,-3.2525;-1.8544,-4.7347,-1.9386;.4993,-4.2596,-1.5299;1.8211,-4.5102,-3.202;-2.352,-5.3978,-3.9287;-2.8917,-4.7714,-1.5966;-1.0271,-3.8591,.2309;-2.1677,-3.6502,.8765;-3.054,-4.1155,.443;-2.1623,-3.5165,2.3437;-2.2196,-3.3366,5.142;-3.3572,-3.7277,3.0473;-.996,-3.2209,3.0654;-1.022,-3.1316,4.4542;-3.3848,-3.6401,4.4364;-4.2714,-3.9708,2.499;-.0374,-3.0814,2.5604;-.0936,-2.9217,4.9929;-4.3218,-3.8164,4.9716;-2.2392,-3.275,6.2337;1.4178,-3.8955,-.6249;2.1787,-3.3927,-1.0774;.5176,.2463,-4.7071;-3.0826,-1.726,.0214;-2.9049,-.976,1.1838;-1.8419,-.3249,1.5143;-.3761,.5612,1.2186;-.454,1.4534,-.4115;.9835,-.6853,1.4058;-.3781,1.7596,2.6581;-3.8772,-.969,2.0848;-3.6484,-.3564,3.3432;-.2158,.7594,-1.2365;.3206,2.2429,-.41;-1.4337,1.9378,-.5737;1.0104,-1.0482,2.447;1.957,-.2207,1.1691;.8627,-1.5299,.7073;-.4329,1.2244,3.6226;.5536,2.3546,2.6564;-1.2258,2.4658,2.6021;-2.7848,-.8105,3.854;-4.5614,-.5344,3.926;-3.4817,.7263,3.2238;4.8412,-.7073,.9925;4.4106,-2.0331,.8552;3.7579,-2.6763,1.8993;3.5526,-1.9809,3.0874;4.0353,-.69,3.2812;4.6882,-.0603,2.2262;4.5126,-2.5321,-.1104;3.3586,-3.684,1.7771;2.6912,-2.5777,4.1131;3.8556,-.1784,4.2272;5.0346,.9706,2.3406;-.7994,.4698,-4.283;-1.7813,-.4961,-4.46;-1.4356,-1.6894,-5.0842;-.1494,-1.9231,-5.561;.8255,-.9543,-5.3624;-1.0422,1.3944,-3.7528;-2.8004,-.3484,-4.1001;-2.4495,-2.7375,-5.2237;.079,-2.8648,-6.0608;1.8458,-1.1444,-5.6957;2.3606,-1.8811,5.0522;2.3161,-3.7195,3.9489;-2.2294,-3.6381,-6.0048;-3.45,-2.6523,-4.5395;7.0732,1.1586,-1.492;6.1123,1.5484,-2.4701;8.4425,1.4854,-1.6911;8.8526,2.1481,-2.8213;9.1688,1.1861,-.9292;9.9093,2.3879,-2.9665;6.5728,2.2157,-3.639;7.9046,2.5066,-3.8097;5.8513,2.4882,-4.4128;8.2361,3.0124,-4.7203;3.4055,3.1502,-3.3314;2.2901,3.5639,-4.118;4.2157,4.1601,-2.7399;3.9671,5.4933,-2.9649;5.0441,3.8706,-2.0915;4.6059,6.2481,-2.4978;2.0673,4.9501,-4.3446;2.8902,5.898,-3.789;1.2154,5.2491,-4.9633;2.7074,6.9617,-3.9671;-4.4806,-2.2062,-.295;-4.4516,-2.9973,-1.0642;-5.0061,-2.5914,.5939;-5.0984,-1.3869,-.7094;-2.1813,-1.4264,-1.1497;-2.3193,-.3844,-1.4942;-1.1048,-1.5507,-.9456;-2.4223,-2.0785,-2.0022;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414027437</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001858416794 0.000375934530 0.015577928470 0.005335154955</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030455472 -0.000866606 0.000147569 0.000238496 0.000274423 0.000375575 0.000383726 0.000440318 0.000595192 0.000708160 0.000903525 0.001067653 0.001150201 0.001165835 0.001301687 0.001341871 0.001531682 0.001720042 0.001746508 0.001834216 0.001951589 0.002285732 0.002346281 0.002577617 0.002705821 0.003037058 0.003117665 0.003313147 0.003694639 0.003781274 0.004084377 0.004469143 0.004794436 0.004844115 0.005684917 0.005845782 0.005915842 0.006295316 0.006638331 0.007393417 0.007683269 0.007940002 0.008711147 0.009156922 0.009598168 0.010347367 0.010846304 0.011223344 0.011529726 0.011822690 0.012656443 0.013034800 0.013693711 0.013893172 0.014566355 0.015138563 0.015320423 0.015484775 0.015860437 0.016565088 0.016947522 0.017259882 0.018367938 0.018718465 0.019261479 0.020203374 0.021071677 0.021145092 0.022118706 0.022997273 0.024668557 0.025474888 0.025656755 0.026342893 0.026602254 0.028422023 0.029101280 0.030776102 0.031670946 0.032031907 0.033166920 0.033850498 0.035390431 0.035826030 0.038041427 0.038598248 0.039876785 0.040289051 0.041247379 0.044128974 0.044656970 0.044907374 0.046758024 0.049096548 0.049998224 0.050518195 0.050764358 0.051136738 0.052407776 0.052450769 0.052726522 0.052817635 0.054094958 0.054422285 0.055224392 0.055628605 0.056372396 0.056453402 0.056877110 0.057972524 0.059602499 0.060417087 0.061243969 0.061457509 0.062538918 0.063070327 0.063986583 0.064737077 0.065012615 0.066157466 0.067369471 0.068360413 0.071343686 0.072403490 0.073959100 0.075698210 0.077285638 0.083178685 0.084546110 0.086256216 0.086790860 0.087342197 0.089862472 0.090215592 0.092692616 0.094375582 0.094558938 0.096128003 0.096790001 0.097535475 0.098329684 0.099343460 0.100007314 0.101538055 0.101879621 0.102662198 0.103072855 0.103785944 0.103896936 0.106155210 0.106588361 0.106968715 0.108742849 0.109701825 0.110361269 0.111977450 0.112540895 0.114367861 0.115953261 0.118600420 0.120097560 0.120852603 0.121640298 0.123347954 0.125009217 0.126069580 0.126758105 0.131336611 0.134625123 0.135367788 0.142275409 0.143079494 0.146608707 0.146841183 0.149355373 0.151120612 0.153884224 0.154314471 0.156341892 0.159977417 0.161372773 0.173014415 0.173597144 0.178031142 0.183674045 0.184550726 0.188833458 0.189741209 0.192892902 0.193631403 0.197759632 0.199603240 0.204257065 0.206607215 0.206775586 0.209646876 0.210512266 0.214152180 0.215836839 0.217130868 0.219513419 0.224596974 0.225916075 0.231495935 0.234574099 0.234925095 0.235458379 0.244270875 0.255244751 0.256809085 0.262101077 0.267200665 0.278625130 0.282749828 0.286112804 0.289692089 0.294374686 0.303189657 0.305392015 0.305888151 0.307313110 0.314901127 0.316096991 0.321822236 0.327573273 0.330361296 0.349378489 0.350941354 0.353233458 0.355052831 0.358751303 0.361781967 0.362210446 0.379057181 0.383684355 0.390835089 0.409994594 0.424877656 0.429121067 0.450706467 0.467030823 0.469824098 0.475752808 0.481758011 0.483616019 0.489436421 0.504907238 0.512960242 0.534129299 0.565675758 0.572228015 0.590336565 0.592783555 0.603645588 0.606017137 0.641345701 0.645066599 0.646212619 0.673571604 0.675454608 0.684388828 0.691285657 0.692040290 0.699000095 0.703936992 0.715295613 0.740577403 0.750783128 0.753745217 0.762345735 0.772072090 0.778420121 0.810077694 0.810452503 0.813107765 0.820698599 0.821051148 0.825419141 0.830691576 0.832902013 0.835513282 0.844561070 0.845141243 0.846925398 0.857755281 0.864265218 0.864755868 0.872460545 0.878719889 0.883683026 0.888960869 0.891705009 0.899042377 0.901252930 0.919897540 0.923050115 0.931953817 0.934522559 0.964355940 0.975558716 0.984931762 1.000347882 1.013694409 1.025880615 1.040543636 1.048815469 1.056133306 1.064837514 1.086023947 1.087986383 1.102403591 1.105484190 1.112069593 1.114267463 1.123183683 1.135028647 1.139778907 1.170652263 1.173588967 1.179056880 1.183885470 1.187940116 1.194284755 1.216863242 1.224475413 1.270871188 1.298742206 1.317067856 1.327322097 1.330894458 1.332509088 1.333800854 1.335353754 1.342072797 1.344770736 1.358125743 1.375042327 1.381988008 1.383322612 1.391079959 1.419245026 1.423109033 1.551236472 1.660529764 1.773053886</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">120</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34039241" y3="0.05425425" z3="-0.19153127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38712552" y3="0.1653652" z3="0.41660707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64828087" y3="0.4395015" z3="-0.34284104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73157176" y3="1.23496792" z3="-2.26426752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38938946" y3="0.43806244" z3="-1.1844547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73019847" y3="0.84707624" z3="-3.66288103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63811258" y3="1.74836807" z3="-3.13802181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38696364" y3="2.59430916" z3="-4.61886147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56300874" y3="1.25279212" z3="-4.37568537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50826242" y3="2.93127696" z3="-5.17758448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92275775" y3="-0.48307474" z3="-3.43966391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09823812" y3="0.0518681" z3="-1.00111064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40053352" y3="-1.09357105" z3="-1.99784558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92910657" y3="-0.96388274" z3="-1.82282709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10387088" y3="-2.41735952" z3="-1.84271439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1395411" y3="-3.61867966" z3="0.6720657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00658615" y3="-5.24337777" z3="-4.74796823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23630636" y3="-4.98920061" z3="-3.70967174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83698176" y3="-4.30776902" z3="-1.08861052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78722639" y3="-4.58169692" z3="-2.85593744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55240739" y3="-5.082851" z3="-3.25276542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85343549" y3="-4.73714064" z3="-1.93776144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49886486" y3="-4.2555329" z3="-1.52913858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82024027" y3="-4.49840041" z3="-3.20155858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35038621" y3="-5.39618395" z3="-3.92949051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88965705" y3="-4.77971697" z3="-1.59499496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02774123" y3="-3.8631949" z3="0.23326869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16847335" y3="-3.65518826" z3="0.87895817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05491539" y3="-4.11984445" z3="0.444506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16344324" y3="-3.52243631" z3="2.34612641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22151868" y3="-3.34314706" z3="5.14423962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35796483" y3="-3.73591548" z3="3.04954249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99777914" y3="-3.2249998" z3="3.06776101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02414531" y3="-3.13601751" z3="4.4565316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38611157" y3="-3.64850206" z3="4.43855599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27169278" y3="-3.98042649" z3="2.50115863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03957659" y3="-3.08364314" z3="2.5629012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09617744" y3="-2.92451841" z3="4.99522611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32295715" y3="-3.82621616" z3="4.97379624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24165056" y3="-3.28156639" z3="6.23585508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4184259" y3="-3.89188108" z3="-0.62362252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17652152" y3="-3.38593816" z3="-1.07471358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5195224" y3="0.25010669" z3="-4.70920509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08364175" y3="-1.73001117" z3="0.02503397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91117592" y3="-0.98109197" z3="1.18758456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85317778" y3="-0.32623218" z3="1.52170255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38225814" y3="0.55622973" z3="1.22358108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46321608" y3="1.45420771" z3="-0.4038284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97836953" y3="-0.69026729" z3="1.40406445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37999288" y3="1.75142673" z3="2.6666274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88544012" y3="-0.97757479" z3="2.08598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65656815" y3="-0.36620703" z3="3.34644952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21791882" y3="0.7658071" z3="-1.22981787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30615385" y3="2.24875277" z3="-0.39802789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44525741" y3="1.93108281" z3="-0.56719261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00978758" y3="-1.05282968" z3="2.44470007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94663064" y3="-0.2205685" z3="1.16473999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8599311" y3="-1.5332183" z3="0.70480542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43328928" y3="1.21354566" z3="3.6298541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5506643" y3="2.3471204" z3="2.66509605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22811844" y3="2.45696651" z3="2.61439973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79203669" y3="-0.82238397" z3="3.85605075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57058662" y3="-0.54371331" z3="3.92938941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48820312" y3="0.71718222" z3="3.22935312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.839129" y3="-0.6994098" z3="0.99263216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41264551" y3="-2.02644894" z3="0.85656811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75985947" y3="-2.67024382" z3="1.90051127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5504875" y3="-1.9741084" z3="3.08713311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02933294" y3="-0.68175397" z3="3.27990525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68172966" y3="-0.05143378" z3="2.22490669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51828162" y3="-2.52651776" z3="-0.10743926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36363358" y3="-3.67910066" z3="1.77919226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68916601" y3="-2.57179799" z3="4.11241784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84730684" y3="-0.16987928" z3="4.22556744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02522426" y3="0.98039532" z3="2.33835324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79589335" y3="0.47460114" z3="-4.28230479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77846661" y3="-0.49099664" z3="-4.45696213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43511269" y3="-1.68438039" z3="-5.08059162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15036407" y3="-1.91946511" z3="-5.56040602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8250677" y3="-0.9507153" z3="-5.36351054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03751803" y3="1.39947181" z3="-3.75237936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79560245" y3="-0.34109587" z3="-4.09550219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44995873" y3="-2.73069437" z3="-5.21867376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07648477" y3="-2.86103907" z3="-6.06043554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84733528" y3="-1.13731095" z3="-5.7018228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36052286" y3="-1.87601628" z3="5.05404013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31227418" y3="-3.71357891" z3="3.94565604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23228644" y3="-3.63129487" z3="-6.00078185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44873233" y3="-2.6441374" z3="-4.53235089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07480524" y3="1.15536488" z3="-1.49407289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11529314" y3="1.5446799" z3="-2.47362459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44484542" y3="1.47882135" z3="-1.69339105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85712728" y3="2.13894042" z3="-2.82514588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17050969" y3="1.18200704" z3="-0.92969348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91471713" y3="2.37710183" z3="-2.97045157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57770302" y3="2.20859053" z3="-3.64399196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91064821" y3="2.49692376" z3="-3.8149836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85726096" y3="2.48104433" z3="-4.41872316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24383166" y3="3.00157113" z3="-4.72662296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41121257" y3="3.15292331" z3="-3.33824056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29659251" y3="3.56689091" z3="-4.12574225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22251689" y3="4.16327072" z3="-2.74774875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97634489" y3="5.49641977" z3="-2.97534484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05095119" y3="3.87322215" z3="-2.09947399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61558751" y3="6.25181475" z3="-2.50863653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07664476" y3="4.95299026" z3="-4.35557283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90088577" y3="5.9008185" z3="-3.80132671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22634913" y3="5.25125949" z3="-4.97661336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72101321" y3="6.96393428" z3="-3.98268142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48066924" y3="-2.21153368" z3="-0.29408803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.449576" y3="-3.00189058" z3="-1.06330506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00727305" y3="-2.59752514" z3="0.59368364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09832449" y3="-1.39246913" z3="-0.70890062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18096549" y3="-1.42815442" z3="-1.14465743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32070814" y3="-0.38763686" z3="-1.48969648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10386801" y3="-1.55170127" z3="-0.9406513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42115994" y3="-2.08035895" z3="-1.99798085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3404,.0543,-.1915;7.3871,.1654,.4166;6.6483,.4395,-.3428;4.7316,1.235,-2.2643;4.3894,.4381,-1.1845;2.7302,.8471,-3.6629;3.6381,1.7484,-3.138;1.387,2.5943,-4.6189;1.563,1.2528,-4.3757;.5083,2.9313,-5.1776;2.9228,-.4831,-3.4397;3.0982,.0519,-1.0011;2.4005,-1.0936,-1.9978;.9291,-.9639,-1.8228;3.1039,-2.4174,-1.8427;-.1395,-3.6187,.6721;-.0066,-5.2434,-4.748;-.2363,-4.9892,-3.7097;-.837,-4.3078,-1.0886;.7872,-4.5817,-2.8559;-1.5524,-5.0829,-3.2528;-1.8534,-4.7371,-1.9378;.4989,-4.2555,-1.5291;1.8202,-4.4984,-3.2016;-2.3504,-5.3962,-3.9295;-2.8897,-4.7797,-1.595;-1.0277,-3.8632,.2333;-2.1685,-3.6552,.879;-3.0549,-4.1198,.4445;-2.1634,-3.5224,2.3461;-2.2215,-3.3431,5.1442;-3.358,-3.7359,3.0495;-.9978,-3.225,3.0678;-1.0241,-3.136,4.4565;-3.3861,-3.6485,4.4386;-4.2717,-3.9804,2.5012;-.0396,-3.0836,2.5629;-.0962,-2.9245,4.9952;-4.323,-3.8262,4.9738;-2.2417,-3.2816,6.2359;1.4184,-3.8919,-.6236;2.1765,-3.3859,-1.0747;.5195,.2501,-4.7092;-3.0836,-1.73,.025;-2.9112,-.9811,1.1876;-1.8532,-.3262,1.5217;-.3823,.5562,1.2236;-.4632,1.4542,-.4038;.9784,-.6903,1.4041;-.38,1.7514,2.6666;-3.8854,-.9776,2.086;-3.6566,-.3662,3.3464;-.2179,.7658,-1.2298;.3062,2.2488,-.398;-1.4453,1.9311,-.5672;1.0098,-1.0528,2.4447;1.9466,-.2206,1.1647;.8599,-1.5332,.7048;-.4333,1.2135,3.6299;.5507,2.3471,2.6651;-1.2281,2.457,2.6144;-2.792,-.8224,3.8561;-4.5706,-.5437,3.9294;-3.4882,.7172,3.2294;4.8391,-.6994,.9926;4.4126,-2.0264,.8566;3.7599,-2.6702,1.9005;3.5505,-1.9741,3.0871;4.0293,-.6818,3.2799;4.6817,-.0514,2.2249;4.5183,-2.5265,-.1074;3.3636,-3.6791,1.7792;2.6892,-2.5718,4.1124;3.8473,-.1699,4.2256;5.0252,.9804,2.3384;-.7959,.4746,-4.2823;-1.7785,-.491,-4.457;-1.4351,-1.6844,-5.0806;-.1504,-1.9195,-5.5604;.8251,-.9507,-5.3635;-1.0375,1.3995,-3.7524;-2.7956,-.3411,-4.0955;-2.45,-2.7307,-5.2187;.0765,-2.861,-6.0604;1.8473,-1.1373,-5.7018;2.3605,-1.876,5.054;2.3123,-3.7136,3.9457;-2.2323,-3.6313,-6.0008;-3.4487,-2.6441,-4.5324;7.0748,1.1554,-1.4941;6.1153,1.5447,-2.4736;8.4448,1.4788,-1.6934;8.8571,2.1389,-2.8251;9.1705,1.182,-.9297;9.9147,2.3771,-2.9705;6.5777,2.2086,-3.644;7.9106,2.4969,-3.815;5.8573,2.481,-4.4187;8.2438,3.0016,-4.7266;3.4112,3.1529,-3.3382;2.2966,3.5669,-4.1257;4.2225,4.1633,-2.7477;3.9763,5.4964,-2.9753;5.051,3.8732,-2.0995;4.6156,6.2518,-2.5086;2.0766,4.953,-4.3556;2.9009,5.9008,-3.8013;1.2263,5.2513,-4.9766;2.721,6.9639,-3.9827;-4.4807,-2.2115,-.2941;-4.4496,-3.0019,-1.0633;-5.0073,-2.5975,.5937;-5.0983,-1.3925,-.7089;-2.181,-1.4282,-1.1447;-2.3207,-.3876,-1.4897;-1.1039,-1.5517,-.9407;-2.4212,-2.0804,-1.998;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414095304</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002002949338 0.000362309518 0.019312374265 0.005334782306</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030459528 -0.000872343 0.000148359 0.000239559 0.000274709 0.000376023 0.000383866 0.000441554 0.000595979 0.000708358 0.000903521 0.001068753 0.001150444 0.001180234 0.001301877 0.001350159 0.001532649 0.001721411 0.001747625 0.001841480 0.001951372 0.002300337 0.002346483 0.002580590 0.002705990 0.003043505 0.003120927 0.003314205 0.003711592 0.003784511 0.004085001 0.004480141 0.004800442 0.004846905 0.005688560 0.005845787 0.005923331 0.006295147 0.006642604 0.007393224 0.007682798 0.007940923 0.008717180 0.009158978 0.009611459 0.010366113 0.010846947 0.011270226 0.011571693 0.011854664 0.012661317 0.013035675 0.013697557 0.013921741 0.014566844 0.015140118 0.015322789 0.015487576 0.015860841 0.016565802 0.016978179 0.017260510 0.018377932 0.018718695 0.019263654 0.020219983 0.021071621 0.021146472 0.022147117 0.022998288 0.024686672 0.025523915 0.025829405 0.026353100 0.026614253 0.028422873 0.029100936 0.030830177 0.031674631 0.032040705 0.033166816 0.033855355 0.035433273 0.035835499 0.038041650 0.038599465 0.039880135 0.040300098 0.041252719 0.044130480 0.044683159 0.044907131 0.046764440 0.049096573 0.049998500 0.050524080 0.050764594 0.051137148 0.052407894 0.052450878 0.052729755 0.052817632 0.054099205 0.054449420 0.055225687 0.055634596 0.056372500 0.056453713 0.056877339 0.057977830 0.059630177 0.060421929 0.061247414 0.061485103 0.062539827 0.063070548 0.064109803 0.064744294 0.065013347 0.066159832 0.067374487 0.068364811 0.071356178 0.072401856 0.073959713 0.075702692 0.077297639 0.083180504 0.084546338 0.086279768 0.086790921 0.087342956 0.089869973 0.090215426 0.092694007 0.094429557 0.094562986 0.096143547 0.096790024 0.097540719 0.098342203 0.099344799 0.100009105 0.101544472 0.101889935 0.102662674 0.103085144 0.103786953 0.103897792 0.106156372 0.106617468 0.106972698 0.108757294 0.109703606 0.110370786 0.111995099 0.112550810 0.114370761 0.115953367 0.118604663 0.120113161 0.120861987 0.121643270 0.123365964 0.125009209 0.126074568 0.126758200 0.131342498 0.134630805 0.135367936 0.142276008 0.143079028 0.146608830 0.146873403 0.149380924 0.151135341 0.153888342 0.154314309 0.156343473 0.160002261 0.161398944 0.173014460 0.173598258 0.178031589 0.183677085 0.184551009 0.188835633 0.189745664 0.192900196 0.193633982 0.197763361 0.199606175 0.204257170 0.206609277 0.206777622 0.209646907 0.210518907 0.214153868 0.215879450 0.217135351 0.219517380 0.224598437 0.225916624 0.231496965 0.234574150 0.234925283 0.235460237 0.244271494 0.255259954 0.256809940 0.262117338 0.267201796 0.278630106 0.282749820 0.286113002 0.289697032 0.294380173 0.303189898 0.305394203 0.305897061 0.307349929 0.314909123 0.316123923 0.321822346 0.327606610 0.330447809 0.349396754 0.351030587 0.353287930 0.355069035 0.359014529 0.361781965 0.362215233 0.379060112 0.383696666 0.390868467 0.410001166 0.424885723 0.429130797 0.450706996 0.467050310 0.469832000 0.475757415 0.481764074 0.483624338 0.489436529 0.504984280 0.512994581 0.534145082 0.565691445 0.572257700 0.590383882 0.592784002 0.603951324 0.606040976 0.641418044 0.645070111 0.646229298 0.673622416 0.675482988 0.684389645 0.691285665 0.692040710 0.699006202 0.703937482 0.715296023 0.740588165 0.750787474 0.753789156 0.762500980 0.772072651 0.778421782 0.810086715 0.810520959 0.813129016 0.820699431 0.821052223 0.825436131 0.830758433 0.833046621 0.835542123 0.844651338 0.845154171 0.847028517 0.857759694 0.864265363 0.864759578 0.872487237 0.878735493 0.883683218 0.888966511 0.891708401 0.899114174 0.901274827 0.919927378 0.923068581 0.932005938 0.934522679 0.964357594 0.975560762 0.984937025 1.000364358 1.013741073 1.025923170 1.040543728 1.048836539 1.056145558 1.064837795 1.086029605 1.088024800 1.102450573 1.105489199 1.112071536 1.114317091 1.123185022 1.135028651 1.139824838 1.170653722 1.173590334 1.179369671 1.183886902 1.187951445 1.194285060 1.216940379 1.224482467 1.271032551 1.298743362 1.317070895 1.327327734 1.330929868 1.332546357 1.333809021 1.335356695 1.342167009 1.344774211 1.358126574 1.375042435 1.381992381 1.383369301 1.391118924 1.419267745 1.423109776 1.551237023 1.660529675 1.773063312</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">121</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33930931" y3="0.05752363" z3="-0.19199556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38632236" y3="0.16331921" z3="0.41490598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64830269" y3="0.43987058" z3="-0.34411511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73333002" y3="1.23902869" z3="-2.26569044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38934187" y3="0.44313031" z3="-1.18490913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73178917" y3="0.85248925" z3="-3.66341308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64107199" y3="1.75283325" z3="-3.14049188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39259432" y3="2.5989257" z3="-4.62509566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56579642" y3="1.25882658" z3="-4.37728859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51498599" y3="2.93551627" z3="-5.18578822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92225436" y3="-0.47788997" z3="-3.43858533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09750226" y3="0.05996491" z3="-1.00060603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39819159" y3="-1.08570054" z3="-1.99614742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92692571" y3="-0.95340953" z3="-1.82244881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10003701" y3="-2.41016859" z3="-1.83892984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14192235" y3="-3.62141976" z3="0.67556726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00547649" y3="-5.23369847" z3="-4.74787264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2354035" y3="-4.98300534" z3="-3.70876467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8372909" y3="-4.30934159" z3="-1.0861098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78686031" y3="-4.57322898" z3="-2.8548154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55094731" y3="-5.0821797" z3="-3.25150049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85292752" y3="-4.73983932" z3="-1.93572966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49810855" y3="-4.25141093" z3="-1.52708493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81899392" y3="-4.4845389" z3="-3.20133322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.348035" y3="-5.39660789" z3="-3.92863732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89003884" y3="-4.78388042" z3="-1.59272211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02917949" y3="-3.86710234" z3="0.23638016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1704865" y3="-3.65941318" z3="0.88138423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05614216" y3="-4.12500367" z3="0.44694371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16565345" y3="-3.52758396" z3="2.3487715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22334405" y3="-3.34998198" z3="5.14713631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36000263" y3="-3.74226284" z3="3.05210078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0001428" y3="-3.22959028" z3="3.07062344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02629365" y3="-3.14135197" z3="4.45948992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38793223" y3="-3.65570028" z3="4.44124345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27379299" y3="-3.98689203" z3="2.50355891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04202737" y3="-3.08715874" z3="2.56588342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0982007" y3="-2.92939633" z3="4.99812466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32446485" y3="-3.83463813" z3="4.97637934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24318765" y3="-3.28916647" z3="6.23887755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41506757" y3="-3.88491655" z3="-0.62125126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17390274" y3="-3.37823942" z3="-1.07211196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52204901" y3="0.25490741" z3="-4.71111686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08502586" y3="-1.73560857" z3="0.02771009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91275626" y3="-0.98698214" z3="1.1918588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85281636" y3="-0.3331674" z3="1.52688094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38674737" y3="0.55294336" z3="1.22903161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47270334" y3="1.45444823" z3="-0.39577008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97422332" y3="-0.69396389" z3="1.40226313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38194817" y3="1.74212625" z3="2.67608876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88770302" y3="-0.9842821" z3="2.08994584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66388831" y3="-0.3729482" z3="3.35004567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22686902" y3="0.76719378" z3="-1.2243136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29385005" y3="2.25208806" z3="-0.38936968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45731504" y3="1.92967176" z3="-0.55595236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00756382" y3="-1.06017488" z3="2.442045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94582754" y3="-0.22728129" z3="1.16188715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85082734" y3="-1.53638471" z3="0.70184927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.433898" y3="1.20055232" z3="3.63730213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5505525" y3="2.33589115" z3="2.67477639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22896995" y3="2.44972937" z3="2.62791108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80031831" y3="-0.82525454" z3="3.86229153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57805721" y3="-0.55417288" z3="3.93029868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49961909" y3="0.7103615" z3="3.23264563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83677568" y3="-0.69388517" z3="0.99289826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41245337" y3="-2.02180931" z3="0.85756856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75936483" y3="-2.66540775" z3="1.90122712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54774676" y3="-1.96819224" z3="3.08708492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02388483" y3="-0.67449074" z3="3.27900849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67661851" y3="-0.04423252" z3="2.22424452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51999997" y3="-2.52263309" z3="-0.10617844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36470782" y3="-3.67511646" z3="1.7800812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6866784" y3="-2.56672064" z3="4.11204846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83928839" y3="-0.1615851" z3="4.22345689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01819361" y3="0.98849215" z3="2.33727266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79307454" y3="0.47885337" z3="-4.28127268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77599318" y3="-0.4868127" z3="-4.45413258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43349764" y3="-1.67992936" z3="-5.08068312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14946891" y3="-1.91405954" z3="-5.56344081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82683988" y3="-0.94566112" z3="-5.36778418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03309818" y3="1.40349988" z3="-3.74984856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79337411" y3="-0.33896138" z3="-4.08888229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44833273" y3="-2.72711253" z3="-5.21598353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07645847" y3="-2.85551367" z3="-6.06447567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84486222" y3="-1.13744157" z3="-5.70421536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35421767" y3="-1.87108311" z3="5.05132044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31385823" y3="-3.70925569" z3="3.94724177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23102399" y3="-3.62813943" z3="-5.99736963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44701823" y3="-2.641097" z3="-4.52891142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07654231" y3="1.15477866" z3="-1.49609602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11814935" y3="1.54671198" z3="-2.47549871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44720834" y3="1.47315222" z3="-1.69650441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86111604" y3="2.13147946" z3="-2.82872956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17140021" y3="1.17183531" z3="-0.93354245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91901245" y3="2.36555051" z3="-2.97476687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58233473" y3="2.20886663" z3="-3.64652033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91569165" y3="2.49291077" z3="-3.81819971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86258051" y3="2.48301932" z3="-4.42126089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25008515" y3="2.99579603" z3="-4.730174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41774959" y3="3.15615556" z3="-3.34592235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30454042" y3="3.56974917" z3="-4.13554765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23128283" y3="4.16592947" z3="-2.75872937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98797926" y3="5.49880455" z3="-2.99057756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05822046" y3="3.87660637" z3="-2.10841211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63020061" y3="6.25285246" z3="-2.52794891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08677656" y3="4.95589068" z3="-4.36857567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91295755" y3="5.90348493" z3="-3.8170822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23628492" y3="5.25503916" z3="-4.98909663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73408347" y3="6.96702822" z3="-4.00023274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48074873" y3="-2.21796111" z3="-0.29444761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44623305" y3="-3.00590316" z3="-1.06537983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00814675" y3="-2.60736488" z3="0.59088118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0988711" y3="-1.39901239" z3="-0.7088258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18099422" y3="-1.43185333" z3="-1.14054653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32029945" y3="-0.38966881" z3="-1.48366645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10469747" y3="-1.55431533" z3="-0.93425656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41866342" y3="-2.08300407" z3="-1.99489572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3393,.0575,-.192;7.3863,.1633,.4149;6.6483,.4399,-.3441;4.7333,1.239,-2.2657;4.3893,.4431,-1.1849;2.7318,.8525,-3.6634;3.6411,1.7528,-3.1405;1.3926,2.5989,-4.6251;1.5658,1.2588,-4.3773;.515,2.9355,-5.1858;2.9223,-.4779,-3.4386;3.0975,.06,-1.0006;2.3982,-1.0857,-1.9961;.9269,-.9534,-1.8224;3.1,-2.4102,-1.8389;-.1419,-3.6214,.6756;-.0055,-5.2337,-4.7479;-.2354,-4.983,-3.7088;-.8373,-4.3093,-1.0861;.7869,-4.5732,-2.8548;-1.5509,-5.0822,-3.2515;-1.8529,-4.7398,-1.9357;.4981,-4.2514,-1.5271;1.819,-4.4845,-3.2013;-2.348,-5.3966,-3.9286;-2.89,-4.7839,-1.5927;-1.0292,-3.8671,.2364;-2.1705,-3.6594,.8814;-3.0561,-4.125,.4469;-2.1657,-3.5276,2.3488;-2.2233,-3.35,5.1471;-3.36,-3.7423,3.0521;-1.0001,-3.2296,3.0706;-1.0263,-3.1414,4.4595;-3.3879,-3.6557,4.4412;-4.2738,-3.9869,2.5036;-.042,-3.0872,2.5659;-.0982,-2.9294,4.9981;-4.3245,-3.8346,4.9764;-2.2432,-3.2892,6.2389;1.4151,-3.8849,-.6213;2.1739,-3.3782,-1.0721;.522,.2549,-4.7111;-3.085,-1.7356,.0277;-2.9128,-.987,1.1919;-1.8528,-.3332,1.5269;-.3867,.5529,1.229;-.4727,1.4544,-.3958;.9742,-.694,1.4023;-.3819,1.7421,2.6761;-3.8877,-.9843,2.0899;-3.6639,-.3729,3.35;-.2269,.7672,-1.2243;.2939,2.2521,-.3894;-1.4573,1.9297,-.556;1.0076,-1.0602,2.442;1.9458,-.2273,1.1619;.8508,-1.5364,.7018;-.4339,1.2006,3.6373;.5506,2.3359,2.6748;-1.229,2.4497,2.6279;-2.8003,-.8253,3.8623;-4.5781,-.5542,3.9303;-3.4996,.7104,3.2326;4.8368,-.6939,.9929;4.4125,-2.0218,.8576;3.7594,-2.6654,1.9012;3.5477,-1.9682,3.0871;4.0239,-.6745,3.279;4.6766,-.0442,2.2242;4.52,-2.5226,-.1062;3.3647,-3.6751,1.7801;2.6867,-2.5667,4.112;3.8393,-.1616,4.2235;5.0182,.9885,2.3373;-.7931,.4789,-4.2813;-1.776,-.4868,-4.4541;-1.4335,-1.6799,-5.0807;-.1495,-1.9141,-5.5634;.8268,-.9457,-5.3678;-1.0331,1.4035,-3.7498;-2.7934,-.339,-4.0889;-2.4483,-2.7271,-5.216;.0765,-2.8555,-6.0645;1.8449,-1.1374,-5.7042;2.3542,-1.8711,5.0513;2.3139,-3.7093,3.9472;-2.231,-3.6281,-5.9974;-3.447,-2.6411,-4.5289;7.0765,1.1548,-1.4961;6.1181,1.5467,-2.4755;8.4472,1.4732,-1.6965;8.8611,2.1315,-2.8287;9.1714,1.1718,-.9335;9.919,2.3656,-2.9748;6.5823,2.2089,-3.6465;7.9157,2.4929,-3.8182;5.8626,2.483,-4.4213;8.2501,2.9958,-4.7302;3.4177,3.1562,-3.3459;2.3045,3.5697,-4.1355;4.2313,4.1659,-2.7587;3.988,5.4988,-2.9906;5.0582,3.8766,-2.1084;4.6302,6.2529,-2.5279;2.0868,4.9559,-4.3686;2.913,5.9035,-3.8171;1.2363,5.255,-4.9891;2.7341,6.967,-4.0002;-4.4807,-2.218,-.2944;-4.4462,-3.0059,-1.0654;-5.0081,-2.6074,.5909;-5.0989,-1.399,-.7088;-2.181,-1.4319,-1.1405;-2.3203,-.3897,-1.4837;-1.1047,-1.5543,-.9343;-2.4187,-2.083,-1.9949;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411126189</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001893342371 0.000392004267 0.019670966361 0.005340146090</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030466398 -0.000937513 0.000146411 0.000239563 0.000275102 0.000375894 0.000384043 0.000442442 0.000597157 0.000708389 0.000905724 0.001068839 0.001153062 0.001194964 0.001302612 0.001354322 0.001533419 0.001721346 0.001747934 0.001840401 0.001952607 0.002302964 0.002346672 0.002585631 0.002706673 0.003049581 0.003127366 0.003314257 0.003716411 0.003784377 0.004095356 0.004511385 0.004807741 0.004854279 0.005694799 0.005853239 0.005925599 0.006296186 0.006645740 0.007395928 0.007687557 0.007941861 0.008716241 0.009161636 0.009613852 0.010364085 0.010853796 0.011286576 0.011607469 0.011895187 0.012664324 0.013035850 0.013708702 0.013937203 0.014575263 0.015140724 0.015322478 0.015490812 0.015861295 0.016567217 0.017037162 0.017260503 0.018398275 0.018718767 0.019264700 0.020253023 0.021072744 0.021147834 0.022181847 0.022999296 0.024697840 0.025540837 0.025992316 0.026363496 0.026642672 0.028424531 0.029103091 0.030870260 0.031684678 0.032046305 0.033167209 0.033862458 0.035462854 0.035845341 0.038043788 0.038602490 0.039890080 0.040305354 0.041257791 0.044136714 0.044719520 0.044907255 0.046763773 0.049096589 0.049999464 0.050532181 0.050766852 0.051137592 0.052408028 0.052453530 0.052735543 0.052817760 0.054104946 0.054465436 0.055226068 0.055636200 0.056372860 0.056454237 0.056877584 0.057981777 0.059682815 0.060421896 0.061259450 0.061513246 0.062542728 0.063071292 0.064309513 0.064772859 0.065013399 0.066159556 0.067381024 0.068367661 0.071379369 0.072405529 0.073959694 0.075703506 0.077302380 0.083180831 0.084546665 0.086301459 0.086791142 0.087343535 0.089894730 0.090220144 0.092694326 0.094470720 0.094569192 0.096156480 0.096791078 0.097542337 0.098354769 0.099346452 0.100010353 0.101548374 0.101898888 0.102663679 0.103086447 0.103787272 0.103898666 0.106161511 0.106645773 0.106977715 0.108772707 0.109706509 0.110388488 0.112005948 0.112574580 0.114373175 0.115953490 0.118606697 0.120117798 0.120873117 0.121653495 0.123378353 0.125009690 0.126084400 0.126759819 0.131350298 0.134633122 0.135368106 0.142279096 0.143096280 0.146609054 0.146898818 0.149401086 0.151141333 0.153893589 0.154314283 0.156346938 0.160031935 0.161415339 0.173016501 0.173598436 0.178032903 0.183678952 0.184551521 0.188836255 0.189746069 0.192907327 0.193641884 0.197769487 0.199606524 0.204257326 0.206609405 0.206778729 0.209646923 0.210525602 0.214153973 0.215923268 0.217138197 0.219525484 0.224601665 0.225916989 0.231497109 0.234575747 0.234926401 0.235460465 0.244272487 0.255284768 0.256812826 0.262154917 0.267201812 0.278641283 0.282749834 0.286113030 0.289703622 0.294386906 0.303198067 0.305398495 0.305920249 0.307414347 0.314916229 0.316126277 0.321822394 0.327650287 0.330499602 0.349405753 0.351091915 0.353334167 0.355073036 0.359204372 0.361785199 0.362227368 0.379060995 0.383699695 0.390871252 0.410004266 0.424899013 0.429160726 0.450710411 0.467097209 0.469872040 0.475757953 0.481764209 0.483660624 0.489436703 0.505101029 0.513016133 0.534165955 0.565710445 0.572301749 0.590409514 0.592788203 0.604274144 0.606065126 0.641467295 0.645074818 0.646285546 0.673661777 0.675502691 0.684389759 0.691285897 0.692041254 0.699009739 0.703938478 0.715296141 0.740600612 0.750799696 0.753867574 0.762584858 0.772078482 0.778423618 0.810097667 0.810554277 0.813150395 0.820701719 0.821062448 0.825454036 0.830832607 0.833231808 0.835566273 0.844699679 0.845163261 0.847090457 0.857759658 0.864265501 0.864762123 0.872513944 0.878765741 0.883683286 0.888969532 0.891711472 0.899207871 0.901313050 0.919951331 0.923079326 0.932071578 0.934524067 0.964358305 0.975561096 0.984947118 1.000397741 1.013838295 1.025938651 1.040549517 1.048853644 1.056158252 1.064847225 1.086033791 1.088052692 1.102503740 1.105492902 1.112071685 1.114366002 1.123185567 1.135028842 1.139870641 1.170654923 1.173592893 1.179641084 1.183953120 1.187976463 1.194285281 1.217076560 1.224485648 1.271191103 1.298785347 1.317072078 1.327332286 1.330979645 1.332599772 1.333809252 1.335359818 1.342220822 1.344782900 1.358126742 1.375044287 1.382084963 1.383390501 1.391156085 1.419293210 1.423118448 1.551237116 1.660529885 1.773081189</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">122</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33915326" y3="0.06263947" z3="-0.19246134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3867209" y3="0.16692845" z3="0.41548392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6489581" y3="0.44338263" z3="-0.34411776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73556779" y3="1.24209482" z3="-2.2678514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3898379" y3="0.44896106" z3="-1.1859164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73462616" y3="0.85528595" z3="-3.66689912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64492046" y3="1.75570074" z3="-3.1450152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39736218" y3="2.60250473" z3="-4.63140381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56940809" y3="1.26138849" z3="-4.38256455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.520031" y3="2.93986777" z3="-5.19197002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92297389" y3="-0.4745833" z3="-3.43862257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09721481" y3="0.06751289" z3="-1.00165153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39739783" y3="-1.0791552" z3="-1.99552096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92621441" y3="-0.94556361" z3="-1.82235759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09809077" y3="-2.40399183" z3="-1.83616989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14314392" y3="-3.62484093" z3="0.67957885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00539961" y3="-5.22556015" z3="-4.747285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23576529" y3="-4.97689985" z3="-3.70774231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83824198" y3="-4.3097009" z3="-1.08361593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78603803" y3="-4.565586" z3="-2.8537776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55076617" y3="-5.0812046" z3="-3.24976935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85277755" y3="-4.74277741" z3="-1.93302641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4966417" y3="-4.24619167" z3="-1.52547415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.818452" y3="-4.47458031" z3="-3.200752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34705488" y3="-5.3975416" z3="-3.92687908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88785963" y3="-4.79478168" z3="-1.58901079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03031937" y3="-3.87072853" z3="0.23990111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1717948" y3="-3.66400707" z3="0.88465806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05765583" y3="-4.12877455" z3="0.4492066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16746822" y3="-3.53281412" z3="2.35200077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22569077" y3="-3.35636708" z3="5.15031723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36160648" y3="-3.74922536" z3="3.05512313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00233872" y3="-3.23375188" z3="3.07400828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02875825" y3="-3.14601131" z3="4.46283838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3896812" y3="-3.66344179" z3="4.44429616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27490375" y3="-3.99484344" z3="2.50645161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04426661" y3="-3.0901412" z3="2.56940569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10114678" y3="-2.93264716" z3="5.00141444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32602688" y3="-3.84377769" z3="4.97939283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24581735" y3="-3.29604222" z3="6.24203331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41341466" y3="-3.87845391" z3="-0.61944646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17188797" y3="-3.37076807" z3="-1.07002368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5240855" y3="0.25930252" z3="-4.71272643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0860742" y3="-1.73919291" z3="0.0305607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9181051" y3="-0.99204215" z3="1.19521041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86250293" y3="-0.33543421" z3="1.53406503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.39167631" y3="0.54681761" z3="1.2342726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.48200656" y3="1.45488391" z3="-0.38703034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96995464" y3="-0.70037019" z3="1.40067032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38140667" y3="1.73197755" z3="2.68538733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89490373" y3="-0.99239593" z3="2.09086221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67220281" y3="-0.3815326" z3="3.35245947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23082944" y3="0.77392503" z3="-1.2176826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.27904591" y3="2.25726377" z3="-0.37634571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.46908317" y3="1.92298863" z3="-0.54650633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00779435" y3="-1.0659102" z3="2.44000031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93663032" y3="-0.22911378" z3="1.15737844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84847961" y3="-1.54153386" z3="0.69990754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43141928" y3="1.18720451" z3="3.64485226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55049176" y3="2.32573893" z3="2.68410829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22841864" y3="2.43936707" z3="2.64190349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80774504" y3="-0.83459007" z3="3.86446628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5871358" y3="-0.56328204" z3="3.93226159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50785917" y3="0.70241928" z3="3.23666105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83522682" y3="-0.68920334" z3="0.99205355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41399355" y3="-2.01822257" z3="0.85801923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76088875" y3="-2.66182188" z3="1.90187346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5457179" y3="-1.96346887" z3="3.0862671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01810903" y3="-0.66833792" z3="3.27669993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6710738" y3="-0.03823013" z3="2.22201925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52384978" y3="-2.52035797" z3="-0.10466114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36879213" y3="-3.67251238" z3="1.78203164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68434262" y3="-2.56229494" z3="4.11084692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8308767" y3="-0.1544774" z3="4.22021321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01005954" y3="0.99532344" z3="2.33371759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78965182" y3="0.48382186" z3="-4.28131701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77302926" y3="-0.48186873" z3="-4.45294462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43201747" y3="-1.67502362" z3="-5.07793212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14889533" y3="-1.910097" z3="-5.56179438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8272493" y3="-0.9414458" z3="-5.36832992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02922485" y3="1.40861126" z3="-3.75004925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78881486" y3="-0.33172901" z3="-4.08866433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44783263" y3="-2.72152774" z3="-5.21451019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07583367" y3="-2.85140038" z3="-6.06332468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84932293" y3="-1.12649555" z3="-5.71174015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35118622" y3="-1.86631599" z3="5.05028023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31177079" y3="-3.70547681" z3="3.9454772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23196554" y3="-3.62249782" z3="-5.99685041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44547614" y3="-2.63440024" z3="-4.52666004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0787167" y3="1.15561268" z3="-1.49679313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12086916" y3="1.54613406" z3="-2.47757908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45054506" y3="1.47218572" z3="-1.69701245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86590893" y3="2.1248242" z3="-2.83128332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17487844" y3="1.17369132" z3="-0.93262285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92471715" y3="2.35665795" z3="-2.97757843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58649285" y3="2.20310387" z3="-3.65021962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92078186" y3="2.48360427" z3="-3.82230666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86735904" y3="2.47632955" z3="-4.42595927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25621468" y3="2.9815919" z3="-4.73600674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42351027" y3="3.15971322" z3="-3.35325013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31057921" y3="3.57379834" z3="-4.14323817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23890181" y3="4.16986202" z3="-2.76875512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99794836" y3="5.50270113" z3="-3.0039765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06596739" y3="3.88038482" z3="-2.11847181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.64010309" y3="6.25839176" z3="-2.5413563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09611352" y3="4.95921133" z3="-4.38100351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92413009" y3="5.90672531" z3="-3.83228004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24696291" y3="5.25744682" z3="-5.00368337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74862351" y3="6.9693152" z3="-4.0199037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48163574" y3="-2.22266001" z3="-0.2930903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4477465" y3="-3.0115198" z3="-1.06446351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00951663" y3="-2.61161865" z3="0.59301162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10010685" y3="-1.40382352" z3="-0.7072429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1814041" y3="-1.43340826" z3="-1.13667497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3230289" y3="-0.39285731" z3="-1.48068379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10466106" y3="-1.55429329" z3="-0.93050891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41748764" y3="-2.08499209" z3="-1.99134876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3392,.0626,-.1925;7.3867,.1669,.4155;6.649,.4434,-.3441;4.7356,1.2421,-2.2679;4.3898,.449,-1.1859;2.7346,.8553,-3.6669;3.6449,1.7557,-3.145;1.3974,2.6025,-4.6314;1.5694,1.2614,-4.3826;.52,2.9399,-5.192;2.923,-.4746,-3.4386;3.0972,.0675,-1.0017;2.3974,-1.0792,-1.9955;.9262,-.9456,-1.8224;3.0981,-2.404,-1.8362;-.1431,-3.6248,.6796;-.0054,-5.2256,-4.7473;-.2358,-4.9769,-3.7077;-.8382,-4.3097,-1.0836;.786,-4.5656,-2.8538;-1.5508,-5.0812,-3.2498;-1.8528,-4.7428,-1.933;.4966,-4.2462,-1.5255;1.8185,-4.4746,-3.2008;-2.3471,-5.3975,-3.9269;-2.8879,-4.7948,-1.589;-1.0303,-3.8707,.2399;-2.1718,-3.664,.8847;-3.0577,-4.1288,.4492;-2.1675,-3.5328,2.352;-2.2257,-3.3564,5.1503;-3.3616,-3.7492,3.0551;-1.0023,-3.2338,3.074;-1.0288,-3.146,4.4628;-3.3897,-3.6634,4.4443;-4.2749,-3.9948,2.5065;-.0443,-3.0901,2.5694;-.1011,-2.9326,5.0014;-4.326,-3.8438,4.9794;-2.2458,-3.296,6.242;1.4134,-3.8785,-.6194;2.1719,-3.3708,-1.07;.5241,.2593,-4.7127;-3.0861,-1.7392,.0306;-2.9181,-.992,1.1952;-1.8625,-.3354,1.5341;-.3917,.5468,1.2343;-.482,1.4549,-.387;.97,-.7004,1.4007;-.3814,1.732,2.6854;-3.8949,-.9924,2.0909;-3.6722,-.3815,3.3525;-.2308,.7739,-1.2177;.279,2.2573,-.3763;-1.4691,1.923,-.5465;1.0078,-1.0659,2.44;1.9366,-.2291,1.1574;.8485,-1.5415,.6999;-.4314,1.1872,3.6449;.5505,2.3257,2.6841;-1.2284,2.4394,2.6419;-2.8077,-.8346,3.8645;-4.5871,-.5633,3.9323;-3.5079,.7024,3.2367;4.8352,-.6892,.9921;4.414,-2.0182,.858;3.7609,-2.6618,1.9019;3.5457,-1.9635,3.0863;4.0181,-.6683,3.2767;4.6711,-.0382,2.222;4.5238,-2.5204,-.1047;3.3688,-3.6725,1.782;2.6843,-2.5623,4.1108;3.8309,-.1545,4.2202;5.0101,.9953,2.3337;-.7897,.4838,-4.2813;-1.773,-.4819,-4.4529;-1.432,-1.675,-5.0779;-.1489,-1.9101,-5.5618;.8272,-.9414,-5.3683;-1.0292,1.4086,-3.75;-2.7888,-.3317,-4.0887;-2.4478,-2.7215,-5.2145;.0758,-2.8514,-6.0633;1.8493,-1.1265,-5.7117;2.3512,-1.8663,5.0503;2.3118,-3.7055,3.9455;-2.232,-3.6225,-5.9969;-3.4455,-2.6344,-4.5267;7.0787,1.1556,-1.4968;6.1209,1.5461,-2.4776;8.4505,1.4722,-1.697;8.8659,2.1248,-2.8313;9.1749,1.1737,-.9326;9.9247,2.3567,-2.9776;6.5865,2.2031,-3.6502;7.9208,2.4836,-3.8223;5.8674,2.4763,-4.426;8.2562,2.9816,-4.736;3.4235,3.1597,-3.3533;2.3106,3.5738,-4.1432;4.2389,4.1699,-2.7688;3.9979,5.5027,-3.004;5.066,3.8804,-2.1185;4.6401,6.2584,-2.5414;2.0961,4.9592,-4.381;2.9241,5.9067,-3.8323;1.247,5.2574,-5.0037;2.7486,6.9693,-4.0199;-4.4816,-2.2227,-.2931;-4.4477,-3.0115,-1.0645;-5.0095,-2.6116,.593;-5.1001,-1.4038,-.7072;-2.1814,-1.4334,-1.1367;-2.323,-.3929,-1.4807;-1.1047,-1.5543,-.9305;-2.4175,-2.085,-1.9913;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650406614564</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001802456469 0.000405628237 0.015741821546 0.005337955955</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030472985 -0.001045027 0.000145679 0.000239889 0.000275050 0.000376272 0.000384048 0.000442768 0.000597206 0.000709117 0.000905817 0.001069030 0.001154577 0.001199525 0.001304188 0.001354050 0.001533326 0.001721340 0.001748306 0.001851080 0.001960035 0.002307190 0.002351516 0.002585655 0.002707485 0.003050353 0.003125722 0.003316489 0.003722172 0.003784992 0.004101645 0.004532769 0.004814388 0.004855586 0.005695693 0.005863032 0.005926350 0.006297450 0.006646113 0.007398783 0.007703815 0.007942818 0.008720371 0.009163756 0.009613730 0.010367108 0.010857775 0.011287069 0.011632833 0.011924788 0.012665224 0.013038235 0.013724844 0.013941286 0.014596999 0.015140714 0.015328924 0.015496139 0.015862562 0.016568689 0.017103171 0.017261821 0.018439052 0.018719715 0.019265240 0.020294208 0.021076130 0.021148145 0.022219649 0.023009081 0.024700410 0.025556911 0.026107734 0.026372415 0.026697609 0.028443276 0.029106606 0.030882985 0.031698207 0.032047108 0.033168254 0.033871403 0.035476100 0.035858756 0.038049762 0.038612249 0.039911746 0.040307480 0.041261944 0.044148711 0.044766361 0.044914561 0.046767502 0.049096612 0.050001099 0.050540223 0.050767005 0.051138256 0.052409266 0.052457187 0.052740344 0.052819268 0.054112147 0.054472247 0.055226081 0.055637313 0.056373296 0.056454401 0.056879960 0.057981277 0.059720049 0.060422871 0.061275961 0.061545139 0.062549441 0.063072732 0.064567289 0.064958820 0.065013533 0.066161277 0.067386758 0.068368717 0.071412249 0.072413043 0.073960070 0.075704303 0.077303407 0.083180980 0.084549412 0.086327191 0.086791663 0.087347901 0.089912223 0.090226769 0.092698453 0.094483181 0.094571804 0.096162438 0.096794143 0.097542322 0.098369026 0.099348033 0.100010259 0.101553316 0.101909818 0.102664101 0.103087074 0.103788611 0.103898846 0.106168258 0.106659546 0.106979006 0.108786401 0.109714662 0.110408406 0.112012632 0.112598204 0.114376450 0.115953780 0.118606661 0.120117637 0.120882055 0.121667627 0.123387988 0.125011720 0.126090218 0.126761355 0.131352241 0.134635589 0.135368294 0.142285428 0.143121094 0.146609198 0.146916833 0.149408276 0.151143132 0.153909448 0.154321542 0.156353356 0.160047027 0.161422911 0.173019331 0.173598947 0.178039276 0.183679362 0.184553811 0.188838537 0.189746269 0.192914062 0.193647999 0.197772163 0.199607585 0.204263000 0.206609963 0.206778954 0.209646928 0.210536816 0.214154653 0.215972981 0.217141178 0.219537879 0.224610180 0.225919541 0.231497121 0.234581004 0.234928051 0.235460515 0.244274265 0.255319567 0.256818279 0.262212669 0.267203399 0.278658271 0.282750370 0.286113048 0.289715819 0.294402228 0.303245209 0.305403654 0.305966869 0.307517546 0.314928817 0.316126866 0.321822570 0.327695747 0.330528804 0.349409167 0.351118447 0.353364921 0.355073254 0.359345430 0.361795619 0.362246562 0.379066211 0.383707656 0.390880763 0.410004921 0.424909484 0.429209781 0.450717636 0.467146958 0.469940235 0.475758462 0.481768812 0.483769997 0.489436770 0.505265077 0.513026919 0.534185887 0.565710862 0.572321289 0.590425742 0.592793359 0.604560788 0.606082461 0.641487750 0.645074696 0.646348310 0.673683355 0.675505473 0.684389759 0.691286263 0.692044204 0.699011833 0.703939195 0.715296519 0.740609497 0.750827491 0.754011507 0.762627568 0.772087172 0.778423633 0.810102708 0.810577507 0.813163967 0.820705647 0.821101992 0.825467921 0.830917988 0.833477703 0.835586774 0.844716005 0.845166574 0.847156168 0.857759714 0.864265896 0.864764791 0.872551339 0.878840045 0.883683339 0.888973231 0.891713141 0.899362804 0.901372399 0.919970163 0.923083756 0.932108805 0.934525837 0.964361865 0.975561143 0.984968521 1.000427449 1.014041181 1.025944725 1.040577657 1.048865008 1.056178472 1.064886703 1.086036806 1.088069741 1.102578510 1.105494919 1.112075710 1.114444172 1.123185599 1.135029275 1.139909295 1.170654986 1.173592881 1.179815872 1.184170363 1.188000096 1.194289578 1.217300936 1.224486853 1.271208439 1.298849890 1.317072518 1.327346083 1.330984639 1.332635546 1.333810095 1.335364237 1.342227297 1.344782891 1.358129166 1.375045665 1.382179620 1.383393845 1.391212952 1.419304920 1.423118849 1.551237952 1.660532628 1.773103044</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">123</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33800569" y3="0.06848992" z3="-0.19279181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38509965" y3="0.16764756" z3="0.41542414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64849228" y3="0.44450829" z3="-0.34504557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7378674" y3="1.24429986" z3="-2.27090147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38987384" y3="0.45454275" z3="-1.18733355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73718893" y3="0.85868489" z3="-3.66987455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64866088" y3="1.75844171" z3="-3.14943107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40434976" y3="2.60541893" z3="-4.64027257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57335141" y3="1.26596642" z3="-4.38664616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52791119" y3="2.94226784" z3="-5.20271313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9226759" y3="-0.47121551" z3="-3.4390604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09644357" y3="0.07639732" z3="-1.00296074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39541826" y3="-1.07149318" z3="-1.9947117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92421992" y3="-0.93556448" z3="-1.82325472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09452737" y3="-2.39667446" z3="-1.83161173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14488707" y3="-3.62829176" z3="0.68302709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00614304" y3="-5.21560052" z3="-4.74793559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23611449" y3="-4.97066236" z3="-3.70748364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83847464" y3="-4.31140885" z3="-1.08138327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78503304" y3="-4.55835982" z3="-2.85315592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55041244" y3="-5.08001747" z3="-3.24897875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85246324" y3="-4.74548845" z3="-1.93122455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49611865" y3="-4.24343777" z3="-1.52376829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81583695" y3="-4.46107425" z3="-3.2003576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34682214" y3="-5.39595112" z3="-3.92663831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8886685" y3="-4.79831882" z3="-1.58651816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0316204" y3="-3.87425979" z3="0.24260844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17376727" y3="-3.66770939" z3="0.8868699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05888059" y3="-4.13366139" z3="0.45161011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16951757" y3="-3.53778015" z3="2.3545276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22825077" y3="-3.36227541" z3="5.15299169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36341763" y3="-3.75602017" z3="3.05756465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00487493" y3="-3.23751585" z3="3.07676347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03148201" y3="-3.15027911" z3="4.4656492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3918559" y3="-3.67055813" z3="4.44674662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27651634" y3="-4.00249512" z3="2.5087981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04696546" y3="-3.09231529" z3="2.57235618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10387091" y3="-2.93606452" z3="5.00422264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32816301" y3="-3.85202931" z3="4.98167622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24871441" y3="-3.30206859" z3="6.24470823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41209965" y3="-3.8745505" z3="-0.61754854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16891192" y3="-3.36416186" z3="-1.06718293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52746617" y3="0.26355351" z3="-4.71677598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08845375" y3="-1.74492724" z3="0.03374289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92084166" y3="-0.99771489" z3="1.19939404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86339662" y3="-0.34228066" z3="1.53884656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.39663461" y3="0.54351813" z3="1.24014429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.49099426" y3="1.45570227" z3="-0.37850548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96577448" y3="-0.70391059" z3="1.39854097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38333705" y3="1.72198147" z3="2.69585955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89846205" y3="-0.99828717" z3="2.09443205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67861738" y3="-0.38896539" z3="3.35662572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23794373" y3="0.77609093" z3="-1.21091907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.26703673" y3="2.26126951" z3="-0.36698794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.48039871" y3="1.9209466" z3="-0.53622808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00606043" y3="-1.0741059" z3="2.43664183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93514476" y3="-0.23435834" z3="1.15473762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83989013" y3="-1.54380456" z3="0.69539153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43109698" y3="1.17298898" z3="3.65300515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55023087" y3="2.3141554" z3="2.69449813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22946084" y3="2.43130051" z3="2.65764531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81557495" y3="-0.84211027" z3="3.87004308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59454344" y3="-0.57190465" z3="3.9339555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51473266" y3="0.69506867" z3="3.24214433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83280855" y3="-0.68137691" z3="0.99209434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41629384" y3="-2.01187197" z3="0.8591271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76321646" y3="-2.65631496" z3="1.90247819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5437356" y3="-1.95722934" z3="3.08566353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01156592" y3="-0.66026828" z3="3.27532494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66409463" y3="-0.0292124" z3="2.22080469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53028927" y3="-2.51478615" z3="-0.1024973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37477761" y3="-3.66846344" z3="1.78312582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68246796" y3="-2.55748861" z3="4.10956774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8209759" y3="-0.14598316" z3="4.21795012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99948831" y3="1.00560055" z3="2.3318598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78569272" y3="0.48789246" z3="-4.28067683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76943099" y3="-0.47711107" z3="-4.44913655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43005185" y3="-1.67004771" z3="-5.07852147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14822094" y3="-1.90431351" z3="-5.56709704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82922378" y3="-0.93667223" z3="-5.37502543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0227228" y3="1.41238513" z3="-3.74826681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78539892" y3="-0.32963385" z3="-4.07868637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44558497" y3="-2.71616569" z3="-5.20946282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07580007" y3="-2.84548585" z3="-6.06977245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8446503" y3="-1.13033356" z3="-5.71428704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.346637" y3="-1.86189502" z3="5.04824759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3127596" y3="-3.70141566" z3="3.9444632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2310046" y3="-3.61782777" z3="-5.99076981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44221361" y3="-2.62849793" z3="-4.52004833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08024692" y3="1.15341676" z3="-1.49892165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12396548" y3="1.544693" z3="-2.48075125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45244696" y3="1.46649079" z3="-1.69909084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86997052" y3="2.11892695" z3="-2.83362768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17526608" y3="1.16756121" z3="-0.93371032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92913666" y3="2.34937658" z3="-2.97942449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59173993" y3="2.1997592" z3="-3.65424144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92663768" y3="2.47840691" z3="-3.82586064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87360109" y3="2.47244174" z3="-4.43103867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26388631" y3="2.97636787" z3="-4.73977311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42986622" y3="3.1622353" z3="-3.36082799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31888336" y3="3.575995" z3="-4.15349848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.24617189" y3="4.17248881" z3="-2.77741218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.00805186" y3="5.50502016" z3="-3.01610673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.07207542" y3="3.88317429" z3="-2.12571893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.65230889" y3="6.25935871" z3="-2.55632727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.1063945" y3="4.96176434" z3="-4.39350805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.93544528" y3="5.90927138" z3="-3.84583916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25798903" y3="5.26041723" z3="-5.01702018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.76060455" y3="6.97261134" z3="-4.03452092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4827541" y3="-2.22889088" z3="-0.29230167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44487473" y3="-3.01519554" z3="-1.0644321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01153995" y3="-2.62072523" z3="0.5910151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10105721" y3="-1.41002458" z3="-0.70652068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18333444" y3="-1.43713772" z3="-1.13284292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32495501" y3="-0.39493772" z3="-1.47478857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10679818" y3="-1.55745201" z3="-0.92582755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41849346" y3="-2.08779885" z3="-1.98857116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.338,.0685,-.1928;7.3851,.1676,.4154;6.6485,.4445,-.345;4.7379,1.2443,-2.2709;4.3899,.4545,-1.1873;2.7372,.8587,-3.6699;3.6487,1.7584,-3.1494;1.4043,2.6054,-4.6403;1.5734,1.266,-4.3866;.5279,2.9423,-5.2027;2.9227,-.4712,-3.4391;3.0964,.0764,-1.003;2.3954,-1.0715,-1.9947;.9242,-.9356,-1.8233;3.0945,-2.3967,-1.8316;-.1449,-3.6283,.683;-.0061,-5.2156,-4.7479;-.2361,-4.9707,-3.7075;-.8385,-4.3114,-1.0814;.785,-4.5584,-2.8532;-1.5504,-5.08,-3.249;-1.8525,-4.7455,-1.9312;.4961,-4.2434,-1.5238;1.8158,-4.4611,-3.2004;-2.3468,-5.396,-3.9266;-2.8887,-4.7983,-1.5865;-1.0316,-3.8743,.2426;-2.1738,-3.6677,.8869;-3.0589,-4.1337,.4516;-2.1695,-3.5378,2.3545;-2.2283,-3.3623,5.153;-3.3634,-3.756,3.0576;-1.0049,-3.2375,3.0768;-1.0315,-3.1503,4.4656;-3.3919,-3.6706,4.4467;-4.2765,-4.0025,2.5088;-.047,-3.0923,2.5724;-.1039,-2.9361,5.0042;-4.3282,-3.852,4.9817;-2.2487,-3.3021,6.2447;1.4121,-3.8746,-.6175;2.1689,-3.3642,-1.0672;.5275,.2636,-4.7168;-3.0885,-1.7449,.0337;-2.9208,-.9977,1.1994;-1.8634,-.3423,1.5388;-.3966,.5435,1.2401;-.491,1.4557,-.3785;.9658,-.7039,1.3985;-.3833,1.722,2.6959;-3.8985,-.9983,2.0944;-3.6786,-.389,3.3566;-.2379,.7761,-1.2109;.267,2.2613,-.367;-1.4804,1.9209,-.5362;1.0061,-1.0741,2.4366;1.9351,-.2344,1.1547;.8399,-1.5438,.6954;-.4311,1.173,3.653;.5502,2.3142,2.6945;-1.2295,2.4313,2.6576;-2.8156,-.8421,3.87;-4.5945,-.5719,3.934;-3.5147,.6951,3.2421;4.8328,-.6814,.9921;4.4163,-2.0119,.8591;3.7632,-2.6563,1.9025;3.5437,-1.9572,3.0857;4.0116,-.6603,3.2753;4.6641,-.0292,2.2208;4.5303,-2.5148,-.1025;3.3748,-3.6685,1.7831;2.6825,-2.5575,4.1096;3.821,-.146,4.218;4.9995,1.0056,2.3319;-.7857,.4879,-4.2807;-1.7694,-.4771,-4.4491;-1.4301,-1.67,-5.0785;-.1482,-1.9043,-5.5671;.8292,-.9367,-5.375;-1.0227,1.4124,-3.7483;-2.7854,-.3296,-4.0787;-2.4456,-2.7162,-5.2095;.0758,-2.8455,-6.0698;1.8447,-1.1303,-5.7143;2.3466,-1.8619,5.0482;2.3128,-3.7014,3.9445;-2.231,-3.6178,-5.9908;-3.4422,-2.6285,-4.52;7.0802,1.1534,-1.4989;6.124,1.5447,-2.4808;8.4524,1.4665,-1.6991;8.87,2.1189,-2.8336;9.1753,1.1676,-.9337;9.9291,2.3494,-2.9794;6.5917,2.1998,-3.6542;7.9266,2.4784,-3.8259;5.8736,2.4724,-4.431;8.2639,2.9764,-4.7398;3.4299,3.1622,-3.3608;2.3189,3.576,-4.1535;4.2462,4.1725,-2.7774;4.0081,5.505,-3.0161;5.0721,3.8832,-2.1257;4.6523,6.2594,-2.5563;2.1064,4.9618,-4.3935;2.9354,5.9093,-3.8458;1.258,5.2604,-5.017;2.7606,6.9726,-4.0345;-4.4828,-2.2289,-.2923;-4.4449,-3.0152,-1.0644;-5.0115,-2.6207,.591;-5.1011,-1.41,-.7065;-2.1833,-1.4371,-1.1328;-2.325,-.3949,-1.4748;-1.1068,-1.5575,-.9258;-2.4185,-2.0878,-1.9886;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650398258991</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002387592079 0.000456870576 0.021530320083 0.005340284568</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030475708 -0.001311313 0.000146275 0.000239918 0.000275768 0.000376666 0.000385286 0.000446004 0.000599396 0.000710947 0.000905793 0.001070154 0.001158396 0.001203224 0.001304492 0.001358518 0.001534241 0.001721429 0.001748695 0.001865977 0.001966698 0.002325945 0.002364746 0.002585757 0.002708053 0.003050877 0.003125620 0.003317058 0.003725507 0.003788011 0.004103287 0.004532133 0.004813671 0.004857455 0.005698202 0.005869534 0.005929547 0.006299761 0.006646556 0.007401587 0.007732745 0.007944072 0.008732598 0.009163943 0.009620492 0.010384837 0.010866685 0.011292410 0.011637946 0.011926330 0.012665205 0.013040956 0.013728864 0.013940888 0.014626891 0.015141037 0.015348349 0.015501348 0.015863266 0.016573639 0.017154596 0.017267890 0.018502014 0.018722634 0.019265384 0.020326084 0.021081929 0.021148134 0.022243166 0.023019227 0.024700079 0.025578122 0.026163144 0.026378549 0.026763718 0.028494684 0.029107879 0.030881691 0.031706027 0.032047283 0.033168434 0.033877178 0.035484828 0.035883142 0.038059408 0.038634720 0.039939333 0.040307294 0.041266546 0.044161731 0.044807794 0.044951123 0.046775511 0.049096741 0.050001948 0.050540586 0.050767676 0.051138382 0.052411642 0.052459230 0.052741456 0.052823071 0.054118471 0.054471606 0.055226263 0.055655538 0.056373835 0.056454849 0.056883649 0.057995287 0.059728468 0.060427186 0.061288116 0.061568945 0.062556291 0.063075283 0.064662869 0.065013249 0.065603272 0.066177939 0.067390018 0.068369972 0.071464340 0.072417091 0.073961242 0.075705340 0.077303339 0.083181225 0.084554190 0.086345783 0.086792215 0.087353903 0.089912132 0.090226443 0.092709385 0.094482958 0.094571659 0.096162526 0.096801159 0.097542599 0.098379408 0.099349592 0.100010428 0.101559128 0.101921877 0.102664077 0.103091183 0.103795839 0.103898943 0.106172784 0.106666367 0.106978995 0.108794729 0.109721621 0.110429113 0.112015200 0.112616234 0.114384814 0.115957904 0.118606662 0.120118437 0.120884694 0.121677406 0.123394377 0.125011455 0.126091085 0.126764939 0.131352646 0.134637479 0.135368494 0.142289355 0.143129984 0.146609228 0.146933825 0.149408666 0.151147810 0.153942051 0.154354513 0.156358446 0.160047649 0.161427751 0.173024048 0.173600131 0.178060761 0.183679533 0.184553884 0.188838743 0.189747809 0.192920810 0.193650624 0.197773544 0.199609463 0.204273976 0.206619714 0.206779331 0.209646932 0.210560197 0.214158753 0.216037433 0.217141510 0.219558544 0.224615873 0.225921301 0.231497122 0.234585025 0.234929166 0.235461529 0.244276036 0.255356162 0.256821659 0.262274613 0.267205957 0.278680640 0.282750679 0.286113099 0.289738963 0.294435763 0.303364635 0.305406484 0.306044444 0.307653684 0.314958775 0.316132304 0.321822572 0.327728144 0.330548710 0.349409993 0.351122101 0.353386545 0.355074865 0.359417217 0.361804635 0.362263948 0.379100521 0.383719692 0.390912578 0.410005221 0.424913257 0.429228864 0.450727264 0.467189513 0.470019474 0.475761804 0.481783556 0.483959264 0.489438562 0.505489599 0.513026577 0.534216002 0.565711591 0.572324899 0.590440454 0.592797923 0.604770492 0.606099690 0.641493201 0.645074751 0.646431573 0.673694154 0.675507931 0.684389764 0.691286483 0.692053148 0.699013918 0.703939181 0.715302683 0.740614325 0.750878026 0.754259705 0.762630264 0.772092777 0.778432717 0.810105627 0.810581945 0.813174141 0.820707258 0.821168822 0.825471857 0.830973455 0.833784011 0.835593302 0.844718556 0.845168587 0.847197758 0.857760441 0.864267772 0.864765992 0.872595039 0.878968053 0.883684545 0.888973227 0.891713773 0.899557314 0.901490327 0.919998216 0.923085346 0.932134549 0.934528093 0.964371413 0.975561688 0.985004792 1.000439794 1.014377170 1.025946255 1.040622973 1.048874860 1.056202816 1.064979894 1.086038183 1.088085788 1.102680052 1.105495244 1.112084499 1.114589970 1.123186857 1.135030230 1.139941799 1.170655021 1.173599522 1.179887945 1.184473192 1.188043773 1.194296966 1.217666253 1.224488340 1.271210205 1.298900015 1.317074679 1.327366185 1.330984674 1.332651980 1.333811871 1.335366496 1.342227558 1.344783077 1.358133447 1.375045790 1.382206505 1.383396560 1.391331150 1.419317776 1.423137119 1.551238632 1.660534544 1.773107786</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">124</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33726599" y3="0.07252411" z3="-0.19272568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38484366" y3="0.16871969" z3="0.41505717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64862009" y3="0.44723262" z3="-0.34508394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73927834" y3="1.2493347" z3="-2.27134922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3898621" y3="0.46006187" z3="-1.18726537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73901239" y3="0.86316395" z3="-3.67100478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65123732" y3="1.76286477" z3="-3.15167249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40879611" y3="2.6095484" z3="-4.64601892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57626476" y3="1.26945801" z3="-4.39043854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.53351759" y3="2.94677802" z3="-5.20985445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92328168" y3="-0.46653792" z3="-3.43787382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09590407" y3="0.08316374" z3="-1.00242058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39405465" y3="-1.06496114" z3="-1.99347046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92302398" y3="-0.92717917" z3="-1.82282381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09184967" y3="-2.39084254" z3="-1.82928169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14725194" y3="-3.63201795" z3="0.68635424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0072085" y3="-5.20631664" z3="-4.74795578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2376162" y3="-4.96392707" z3="-3.70701357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84057293" y3="-4.31214035" z3="-1.07946413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78255096" y3="-4.54942827" z3="-2.85285771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55127946" y3="-5.07852773" z3="-3.2478797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85366846" y3="-4.74780083" z3="-1.92929056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49308445" y3="-4.2377762" z3="-1.52281718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81369584" y3="-4.44991015" z3="-3.20124322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34609148" y3="-5.39680629" z3="-3.92550326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88819757" y3="-4.80711684" z3="-1.58407895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03355181" y3="-3.87887783" z3="0.2458122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17568831" y3="-3.67285731" z3="0.88988504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06107449" y3="-4.1380175" z3="0.45382195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17176931" y3="-3.54318392" z3="2.35742558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23028289" y3="-3.36834619" z3="5.15586456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36553267" y3="-3.76241992" z3="3.06036779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00734832" y3="-3.24182838" z3="3.07960498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03389853" y3="-3.15476291" z3="4.46848366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39372579" y3="-3.67749332" z3="4.44962597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.278459" y3="-4.00937194" z3="2.51148524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04966486" y3="-3.09548323" z3="2.57506457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10666645" y3="-2.9391337" z3="5.00684614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32963095" y3="-3.86024962" z3="4.98458486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25053685" y3="-3.30858436" z3="6.24764864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40743857" y3="-3.86667175" z3="-0.61645958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16610009" y3="-3.35694605" z3="-1.06618558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52946185" y3="0.26729498" z3="-4.718235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0891362" y3="-1.74869338" z3="0.03718707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92422465" y3="-1.00311348" z3="1.20370663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86999523" y3="-0.34583842" z3="1.54603139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.40024521" y3="0.53766151" z3="1.24571683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.49957552" y3="1.45620756" z3="-0.36911879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96275869" y3="-0.70956109" z3="1.39587988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38241966" y3="1.71087803" z3="2.70611669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90272687" y3="-1.00636342" z3="2.09748973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.68530339" y3="-0.39570532" z3="3.35962574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.24403673" y3="0.78172169" z3="-1.20425702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.25478448" y3="2.26501025" z3="-0.3544079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.49095712" y3="1.91742427" z3="-0.5245392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00666586" y3="-1.08092056" z3="2.43288417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92783983" y3="-0.23574858" z3="1.15032174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83868022" y3="-1.54690093" z3="0.69107995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42913157" y3="1.1578146" z3="3.66113318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55062237" y3="2.30278485" z3="2.70576484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22830999" y3="2.42011761" z3="2.67235253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.82141732" y3="-0.84539991" z3="3.87407693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60095324" y3="-0.58084419" z3="3.93691548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.52434847" y3="0.68840465" z3="3.24427274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83107481" y3="-0.67677749" z3="0.99229695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41732717" y3="-2.00833266" z3="0.86011745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76432224" y3="-2.65283046" z3="1.90339859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54171183" y3="-1.95261133" z3="3.08539345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00580606" y3="-0.65406334" z3="3.27387902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65876899" y3="-0.02304159" z3="2.21977223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53332942" y3="-2.51218531" z3="-0.10099179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37791751" y3="-3.66597174" z3="1.7846173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68022666" y3="-2.55364623" z3="4.10860528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81207045" y3="-0.13864859" z3="4.21515223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99171656" y3="1.01275337" z3="2.33004111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78239094" y3="0.49121082" z3="-4.28165174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76606895" y3="-0.47533788" z3="-4.44945884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42716042" y3="-1.66782983" z3="-5.07577808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14611031" y3="-1.90223394" z3="-5.56602988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83047234" y3="-0.93306181" z3="-5.37566625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02010953" y3="1.4156812" z3="-3.74837393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77988418" y3="-0.32539506" z3="-4.08068834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44330196" y3="-2.71507155" z3="-5.20922535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07624762" y3="-2.8428824" z3="-6.06921563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85246953" y3="-1.11589487" z3="-5.72512319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33912335" y3="-1.8571535" z3="5.04428965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3153851" y3="-3.69921817" z3="3.94570576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22901443" y3="-3.61658622" z3="-5.99136911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43980421" y3="-2.62809092" z3="-4.51898206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08162473" y3="1.15508971" z3="-1.49945175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12608649" y3="1.54796511" z3="-2.4813209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45452579" y3="1.46314997" z3="-1.70068539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87324991" y3="2.11092265" z3="-2.8366177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17648292" y3="1.16116961" z3="-0.93574754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9327618" y3="2.33558991" z3="-2.98381089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59531512" y3="2.20043547" z3="-3.65555934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.93059663" y3="2.47345249" z3="-3.82836569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87805434" y3="2.4760073" z3="-4.43203782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26865654" y3="2.96799934" z3="-4.74319261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.43545158" y3="3.16574728" z3="-3.36822528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.32511695" y3="3.57949428" z3="-4.16206282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.25423478" y3="4.17547839" z3="-2.78851682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.0187904" y3="5.50790797" z3="-3.0314544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.07876813" y3="3.88672218" z3="-2.13485536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.66423143" y3="6.2629129" z3="-2.57331542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.11593857" y3="4.96455323" z3="-4.40706942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.94713349" y3="5.9117621" z3="-3.86269128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.26818251" y3="5.26331647" z3="-5.03145354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7758305" y3="6.97399972" z3="-4.05605124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48335331" y3="-2.23313659" z3="-0.29045156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44649486" y3="-3.01970772" z3="-1.06388402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01224817" y3="-2.62549176" z3="0.59338814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10232888" y3="-1.4141944" z3="-0.70367703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1830845" y3="-1.43874557" z3="-1.1278291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32629737" y3="-0.39759212" z3="-1.47017531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10684708" y3="-1.55735145" z3="-0.91953989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41583752" y3="-2.08913409" z3="-1.98399727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3373,.0725,-.1927;7.3848,.1687,.4151;6.6486,.4472,-.3451;4.7393,1.2493,-2.2713;4.3899,.4601,-1.1873;2.739,.8632,-3.671;3.6512,1.7629,-3.1517;1.4088,2.6095,-4.646;1.5763,1.2695,-4.3904;.5335,2.9468,-5.2099;2.9233,-.4665,-3.4379;3.0959,.0832,-1.0024;2.3941,-1.065,-1.9935;.923,-.9272,-1.8228;3.0918,-2.3908,-1.8293;-.1473,-3.632,.6864;-.0072,-5.2063,-4.748;-.2376,-4.9639,-3.707;-.8406,-4.3121,-1.0795;.7826,-4.5494,-2.8529;-1.5513,-5.0785,-3.2479;-1.8537,-4.7478,-1.9293;.4931,-4.2378,-1.5228;1.8137,-4.4499,-3.2012;-2.3461,-5.3968,-3.9255;-2.8882,-4.8071,-1.5841;-1.0336,-3.8789,.2458;-2.1757,-3.6729,.8899;-3.0611,-4.138,.4538;-2.1718,-3.5432,2.3574;-2.2303,-3.3683,5.1559;-3.3655,-3.7624,3.0604;-1.0073,-3.2418,3.0796;-1.0339,-3.1548,4.4685;-3.3937,-3.6775,4.4496;-4.2785,-4.0094,2.5115;-.0497,-3.0955,2.5751;-.1067,-2.9391,5.0068;-4.3296,-3.8602,4.9846;-2.2505,-3.3086,6.2476;1.4074,-3.8667,-.6165;2.1661,-3.3569,-1.0662;.5295,.2673,-4.7182;-3.0891,-1.7487,.0372;-2.9242,-1.0031,1.2037;-1.87,-.3458,1.546;-.4002,.5377,1.2457;-.4996,1.4562,-.3691;.9628,-.7096,1.3959;-.3824,1.7109,2.7061;-3.9027,-1.0064,2.0975;-3.6853,-.3957,3.3596;-.244,.7817,-1.2043;.2548,2.265,-.3544;-1.491,1.9174,-.5245;1.0067,-1.0809,2.4329;1.9278,-.2357,1.1503;.8387,-1.5469,.6911;-.4291,1.1578,3.6611;.5506,2.3028,2.7058;-1.2283,2.4201,2.6724;-2.8214,-.8454,3.8741;-4.601,-.5808,3.9369;-3.5243,.6884,3.2443;4.8311,-.6768,.9923;4.4173,-2.0083,.8601;3.7643,-2.6528,1.9034;3.5417,-1.9526,3.0854;4.0058,-.6541,3.2739;4.6588,-.023,2.2198;4.5333,-2.5122,-.101;3.3779,-3.666,1.7846;2.6802,-2.5536,4.1086;3.8121,-.1386,4.2152;4.9917,1.0128,2.33;-.7824,.4912,-4.2817;-1.7661,-.4753,-4.4495;-1.4272,-1.6678,-5.0758;-.1461,-1.9022,-5.566;.8305,-.9331,-5.3757;-1.0201,1.4157,-3.7484;-2.7799,-.3254,-4.0807;-2.4433,-2.7151,-5.2092;.0762,-2.8429,-6.0692;1.8525,-1.1159,-5.7251;2.3391,-1.8572,5.0443;2.3154,-3.6992,3.9457;-2.229,-3.6166,-5.9914;-3.4398,-2.6281,-4.519;7.0816,1.1551,-1.4995;6.1261,1.548,-2.4813;8.4545,1.4631,-1.7007;8.8732,2.1109,-2.8366;9.1765,1.1612,-.9357;9.9328,2.3356,-2.9838;6.5953,2.2004,-3.6556;7.9306,2.4735,-3.8284;5.8781,2.476,-4.432;8.2687,2.968,-4.7432;3.4355,3.1657,-3.3682;2.3251,3.5795,-4.1621;4.2542,4.1755,-2.7885;4.0188,5.5079,-3.0315;5.0788,3.8867,-2.1349;4.6642,6.2629,-2.5733;2.1159,4.9646,-4.4071;2.9471,5.9118,-3.8627;1.2682,5.2633,-5.0315;2.7758,6.974,-4.0561;-4.4834,-2.2331,-.2905;-4.4465,-3.0197,-1.0639;-5.0122,-2.6255,.5934;-5.1023,-1.4142,-.7037;-2.1831,-1.4387,-1.1278;-2.3263,-.3976,-1.4702;-1.1068,-1.5574,-.9195;-2.4158,-2.0891,-1.984;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650386104549</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002929352306 0.000524640901 0.018450251519 0.005335646393</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030475693 -0.001606887 0.000146599 0.000240880 0.000276536 0.000377214 0.000385474 0.000448652 0.000601569 0.000712011 0.000907778 0.001074868 0.001160002 0.001216985 0.001304476 0.001362191 0.001535903 0.001721356 0.001748665 0.001863824 0.001969391 0.002337788 0.002388708 0.002585813 0.002710576 0.003051843 0.003125974 0.003318157 0.003727499 0.003787686 0.004127533 0.004547900 0.004814361 0.004873499 0.005712633 0.005869761 0.005929221 0.006300128 0.006649409 0.007406361 0.007760584 0.007944602 0.008748811 0.009164536 0.009636530 0.010396924 0.010869800 0.011316341 0.011641075 0.011926280 0.012665938 0.013046022 0.013728667 0.013945091 0.014650988 0.015142215 0.015382853 0.015509441 0.015863178 0.016575967 0.017177442 0.017282716 0.018563886 0.018729453 0.019265891 0.020336669 0.021090601 0.021148587 0.022255819 0.023023264 0.024703080 0.025600873 0.026181044 0.026389324 0.026807623 0.028573704 0.029107771 0.030888468 0.031705976 0.032049606 0.033168539 0.033878182 0.035485348 0.035927151 0.038063513 0.038671510 0.039968498 0.040309338 0.041269906 0.044169104 0.044832465 0.045010035 0.046783956 0.049096991 0.050002907 0.050540846 0.050772130 0.051138485 0.052413886 0.052459836 0.052741404 0.052827844 0.054121381 0.054478091 0.055226687 0.055698380 0.056374612 0.056457437 0.056885552 0.058040803 0.059728117 0.060432006 0.061293329 0.061584113 0.062562981 0.063078383 0.064694556 0.065013290 0.066123949 0.066670515 0.067390104 0.068389163 0.071562460 0.072417822 0.073962976 0.075710968 0.077304443 0.083181915 0.084558927 0.086358775 0.086792126 0.087357974 0.089919345 0.090233179 0.092726756 0.094483495 0.094571824 0.096163431 0.096813477 0.097542862 0.098385953 0.099351089 0.100011020 0.101563882 0.101935964 0.102664137 0.103097126 0.103803527 0.103898990 0.106178264 0.106667457 0.106979257 0.108799109 0.109722292 0.110437655 0.112015980 0.112625229 0.114397414 0.115967517 0.118606715 0.120119330 0.120886244 0.121683568 0.123395080 0.125014361 0.126092622 0.126765607 0.131354255 0.134638686 0.135368894 0.142289894 0.143129971 0.146609411 0.146953209 0.149411046 0.151165764 0.153983423 0.154483089 0.156359693 0.160048913 0.161430433 0.173029877 0.173600766 0.178099043 0.183682726 0.184557324 0.188839385 0.189753332 0.192928029 0.193650755 0.197774909 0.199613232 0.204287241 0.206636387 0.206781383 0.209646932 0.210610057 0.214169368 0.216111007 0.217141853 0.219597245 0.224618589 0.225921176 0.231497778 0.234587769 0.234929896 0.235463228 0.244276667 0.255380153 0.256822909 0.262331568 0.267207036 0.278710416 0.282750796 0.286113094 0.289775589 0.294505839 0.303561538 0.305409187 0.306172315 0.307824000 0.315022193 0.316138600 0.321822597 0.327743352 0.330580610 0.349410631 0.351122891 0.353403611 0.355074905 0.359439449 0.361807842 0.362270655 0.379181652 0.383741038 0.390957162 0.410006136 0.424913437 0.429233923 0.450737042 0.467206914 0.470066615 0.475765749 0.481791818 0.484250604 0.489445312 0.505764341 0.513034861 0.534247137 0.565729485 0.572331632 0.590460862 0.592799062 0.604870665 0.606104812 0.641493354 0.645074800 0.646489241 0.673695723 0.675534715 0.684389777 0.691286491 0.692066786 0.699014249 0.703939601 0.715317441 0.740618748 0.750943164 0.754655108 0.762632541 0.772094216 0.778465307 0.810106091 0.810584096 0.813181274 0.820715624 0.821254122 0.825472050 0.830999073 0.834124606 0.835593250 0.844719301 0.845169186 0.847229467 0.857761279 0.864273310 0.864767075 0.872651092 0.879177573 0.883688812 0.888975084 0.891713898 0.899789965 0.901672056 0.920017033 0.923086146 0.932135754 0.934528195 0.964380980 0.975562310 0.985056035 1.000439670 1.014813709 1.025950345 1.040671996 1.048891321 1.056231519 1.065126726 1.086038179 1.088095272 1.102820228 1.105495493 1.112093408 1.114895013 1.123190121 1.135031038 1.139959918 1.170655076 1.173622384 1.179919660 1.184765268 1.188080764 1.194306109 1.218204910 1.224496546 1.271263100 1.298910277 1.317082152 1.327382283 1.331001854 1.332663208 1.333824394 1.335373046 1.342241855 1.344787044 1.358137617 1.375045952 1.382216157 1.383404808 1.391593562 1.419322722 1.423234480 1.551239823 1.660536667 1.773113742</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">125</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33635167" y3="0.07701048" z3="-0.1934508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38405969" y3="0.16932171" z3="0.41498666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64849946" y3="0.4479157" z3="-0.34593693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74142955" y3="1.2511721" z3="-2.27420025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38997032" y3="0.4657434" z3="-1.18855159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74208543" y3="0.865864" z3="-3.67495516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65535349" y3="1.76524518" z3="-3.15678606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.41560834" y3="2.61231727" z3="-4.6553547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58076101" y3="1.27328321" z3="-4.39573652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54056688" y3="2.94958034" z3="-5.21969529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92277049" y3="-0.46325389" z3="-3.43778301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09517078" y3="0.09262489" z3="-1.00359582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39181536" y3="-1.0565668" z3="-1.99207984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92086427" y3="-0.91620619" z3="-1.82265688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08747119" y3="-2.38302123" z3="-1.82419664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14864853" y3="-3.63572444" z3="0.68934023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0089519" y3="-5.20019923" z3="-4.74837952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23891725" y3="-4.9599744" z3="-3.70676857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84144641" y3="-4.31324109" z3="-1.07757546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78120144" y3="-4.54434941" z3="-2.85278533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55181504" y3="-5.07916035" z3="-3.24642566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85385414" y3="-4.75127207" z3="-1.92696331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49219511" y3="-4.23547244" z3="-1.52187998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81118777" y3="-4.44028542" z3="-3.20136716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34712458" y3="-5.39808885" z3="-3.92384759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88834733" y3="-4.8139168" z3="-1.58033004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0351153" y3="-3.88162164" z3="0.24811032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17766005" y3="-3.67610904" z3="0.89202008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06259338" y3="-4.14161521" z3="0.45578399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17364108" y3="-3.5480521" z3="2.35986406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23188475" y3="-3.37495303" z3="5.15851226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.366789" y3="-3.76965988" z3="3.06295983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00946955" y3="-3.24563925" z3="3.08212033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03579176" y3="-3.15947927" z3="4.47107027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39488729" y3="-3.68553562" z3="4.45228862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27941365" y3="-4.01784088" z3="2.51422541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05205541" y3="-3.09761679" z3="2.57753345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10852142" y3="-2.9428755" z3="5.00930728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33057603" y3="-3.86966792" z3="4.98737473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25222141" y3="-3.31565211" z3="6.25029356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40727946" y3="-3.86444007" z3="-0.61552663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16229069" y3="-3.35015924" z3="-1.06391821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53342338" y3="0.27186192" z3="-4.72228353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09122827" y3="-1.75251637" z3="0.04060042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92787763" y3="-1.00767921" z3="1.20808547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.87290763" y3="-0.35131015" z3="1.55220318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.40558356" y3="0.53464846" z3="1.25243502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.50927716" y3="1.4584818" z3="-0.35903748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95844436" y3="-0.71272234" z3="1.39434165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38380756" y3="1.70095102" z3="2.71797137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90780256" y3="-1.01160907" z3="2.10030724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.69137588" y3="-0.40338217" z3="3.36410508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.25099814" y3="0.787147" z3="-1.19607605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.24197572" y3="2.27017216" z3="-0.34226195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.50258435" y3="1.91583129" z3="-0.51307129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00462211" y3="-1.08824615" z3="2.43002945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92527096" y3="-0.23946871" z3="1.1483137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83119771" y3="-1.54865538" z3="0.68723302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42736513" y3="1.14322609" z3="3.67022543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55053131" y3="2.29183755" z3="2.71742181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22930004" y3="2.41137141" z3="2.69051385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.8272607" y3="-0.8554492" z3="3.87777874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60774937" y3="-0.58938576" z3="3.9399176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.53004995" y3="0.68140362" z3="3.25146957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82864564" y3="-0.67158529" z3="0.99155551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41893048" y3="-2.0044776" z3="0.8613094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76601211" y3="-2.64901196" z3="1.90477745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53937558" y3="-1.94745689" z3="3.0850984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99934815" y3="-0.64727453" z3="3.27186707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65212625" y3="-0.01631978" z3="2.21754539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53849406" y3="-2.51006775" z3="-0.09813812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38317872" y3="-3.66349347" z3="1.78769081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67771696" y3="-2.54880369" z3="4.1080629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.80287704" y3="-0.13086688" z3="4.21218793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.98209708" y3="1.02044734" z3="2.32640633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77844566" y3="0.49541628" z3="-4.28167104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76240702" y3="-0.47002573" z3="-4.44746781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42480017" y3="-1.6627346" z3="-5.07912212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14427941" y3="-1.8959916" z3="-5.57053567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83345069" y3="-0.92789711" z3="-5.38160369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01394349" y3="1.41965286" z3="-3.74851177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7776361" y3="-0.32347061" z3="-4.07432433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44094052" y3="-2.70893513" z3="-5.20867087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07893057" y3="-2.83685149" z3="-6.07468711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84689104" y3="-1.12187986" z3="-5.72355092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33505034" y3="-1.85153337" z3="5.04339754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3142755" y3="-3.6953999" z3="3.945307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22847437" y3="-3.61075347" z3="-5.99057851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4358466" y3="-2.62042889" z3="-4.51764894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08338906" y3="1.15303989" z3="-1.50099997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12871616" y3="1.54534498" z3="-2.48413127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45740476" y3="1.46081208" z3="-1.70136337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87798404" y3="2.10746068" z3="-2.83778355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17926303" y3="1.16142726" z3="-0.93500861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.93856668" y3="2.33369395" z3="-2.9838873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59951298" y3="2.19440597" z3="-3.65936123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.93585464" y3="2.4671839" z3="-3.83130346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88271018" y3="2.46794739" z3="-4.43715883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.27522" y3="2.96001666" z3="-4.74677602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.44136491" y3="3.16903772" z3="-3.37580757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.33279633" y3="3.58256198" z3="-4.17214015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.26054699" y3="4.17989957" z3="-2.79719355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.02786358" y3="5.51188431" z3="-3.04423779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.08499032" y3="3.89107689" z3="-2.14327191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.67362684" y3="6.26734736" z3="-2.58710301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.12622685" y3="4.96731557" z3="-4.42123124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.95826171" y3="5.9149393" z3="-3.87836057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.28013265" y3="5.26497648" z3="-5.04836981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.78827812" y3="6.97749643" z3="-4.0745015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48460592" y3="-2.23729323" z3="-0.28897256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44520284" y3="-3.02235767" z3="-1.06269467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01431012" y3="-2.63114444" z3="0.59321935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10314839" y3="-1.41811217" z3="-0.7021826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1843908" y3="-1.44084071" z3="-1.12387343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32825125" y3="-0.39911271" z3="-1.46515198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10775833" y3="-1.55865244" z3="-0.91536574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41651049" y3="-2.09088135" z3="-1.98098815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3364,.077,-.1935;7.3841,.1693,.415;6.6485,.4479,-.3459;4.7414,1.2512,-2.2742;4.39,.4657,-1.1886;2.7421,.8659,-3.675;3.6554,1.7652,-3.1568;1.4156,2.6123,-4.6554;1.5808,1.2733,-4.3957;.5406,2.9496,-5.2197;2.9228,-.4633,-3.4378;3.0952,.0926,-1.0036;2.3918,-1.0566,-1.9921;.9209,-.9162,-1.8227;3.0875,-2.383,-1.8242;-.1486,-3.6357,.6893;-.009,-5.2002,-4.7484;-.2389,-4.96,-3.7068;-.8414,-4.3132,-1.0776;.7812,-4.5443,-2.8528;-1.5518,-5.0792,-3.2464;-1.8539,-4.7513,-1.927;.4922,-4.2355,-1.5219;1.8112,-4.4403,-3.2014;-2.3471,-5.3981,-3.9238;-2.8883,-4.8139,-1.5803;-1.0351,-3.8816,.2481;-2.1777,-3.6761,.892;-3.0626,-4.1416,.4558;-2.1736,-3.5481,2.3599;-2.2319,-3.375,5.1585;-3.3668,-3.7697,3.063;-1.0095,-3.2456,3.0821;-1.0358,-3.1595,4.4711;-3.3949,-3.6855,4.4523;-4.2794,-4.0178,2.5142;-.0521,-3.0976,2.5775;-.1085,-2.9429,5.0093;-4.3306,-3.8697,4.9874;-2.2522,-3.3157,6.2503;1.4073,-3.8644,-.6155;2.1623,-3.3502,-1.0639;.5334,.2719,-4.7223;-3.0912,-1.7525,.0406;-2.9279,-1.0077,1.2081;-1.8729,-.3513,1.5522;-.4056,.5346,1.2524;-.5093,1.4585,-.359;.9584,-.7127,1.3943;-.3838,1.701,2.718;-3.9078,-1.0116,2.1003;-3.6914,-.4034,3.3641;-.251,.7871,-1.1961;.242,2.2702,-.3423;-1.5026,1.9158,-.5131;1.0046,-1.0882,2.43;1.9253,-.2395,1.1483;.8312,-1.5487,.6872;-.4274,1.1432,3.6702;.5505,2.2918,2.7174;-1.2293,2.4114,2.6905;-2.8273,-.8554,3.8778;-4.6077,-.5894,3.9399;-3.53,.6814,3.2515;4.8286,-.6716,.9916;4.4189,-2.0045,.8613;3.766,-2.649,1.9048;3.5394,-1.9475,3.0851;3.9993,-.6473,3.2719;4.6521,-.0163,2.2175;4.5385,-2.5101,-.0981;3.3832,-3.6635,1.7877;2.6777,-2.5488,4.1081;3.8029,-.1309,4.2122;4.9821,1.0204,2.3264;-.7784,.4954,-4.2817;-1.7624,-.47,-4.4475;-1.4248,-1.6627,-5.0791;-.1443,-1.896,-5.5705;.8335,-.9279,-5.3816;-1.0139,1.4197,-3.7485;-2.7776,-.3235,-4.0743;-2.4409,-2.7089,-5.2087;.0789,-2.8369,-6.0747;1.8469,-1.1219,-5.7236;2.3351,-1.8515,5.0434;2.3143,-3.6954,3.9453;-2.2285,-3.6108,-5.9906;-3.4358,-2.6204,-4.5176;7.0834,1.153,-1.501;6.1287,1.5453,-2.4841;8.4574,1.4608,-1.7014;8.878,2.1075,-2.8378;9.1793,1.1614,-.935;9.9386,2.3337,-2.9839;6.5995,2.1944,-3.6594;7.9359,2.4672,-3.8313;5.8827,2.4679,-4.4372;8.2752,2.96,-4.7468;3.4414,3.169,-3.3758;2.3328,3.5826,-4.1721;4.2605,4.1799,-2.7972;4.0279,5.5119,-3.0442;5.085,3.8911,-2.1433;4.6736,6.2673,-2.5871;2.1262,4.9673,-4.4212;2.9583,5.9149,-3.8784;1.2801,5.265,-5.0484;2.7883,6.9775,-4.0745;-4.4846,-2.2373,-.289;-4.4452,-3.0224,-1.0627;-5.0143,-2.6311,.5932;-5.1031,-1.4181,-.7022;-2.1844,-1.4408,-1.1239;-2.3283,-.3991,-1.4652;-1.1078,-1.5587,-.9154;-2.4165,-2.0909,-1.981;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650376826739</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003192383578 0.000544312787 0.018984196116 0.005339190709</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030476998 -0.001591006 0.000146816 0.000240962 0.000276478 0.000377439 0.000384897 0.000448773 0.000602707 0.000711081 0.000909650 0.001075118 0.001160532 0.001219604 0.001304497 0.001361856 0.001535864 0.001723085 0.001748999 0.001870740 0.001969519 0.002337238 0.002388416 0.002586420 0.002710479 0.003051985 0.003126009 0.003318036 0.003727051 0.003789345 0.004138286 0.004567997 0.004818441 0.004881488 0.005721976 0.005870073 0.005935082 0.006300375 0.006650072 0.007410153 0.007785108 0.007944596 0.008766311 0.009167507 0.009652642 0.010403912 0.010872306 0.011338103 0.011640431 0.011930567 0.012668497 0.013050141 0.013739927 0.013954678 0.014661404 0.015142469 0.015416097 0.015516710 0.015866031 0.016578927 0.017181954 0.017295676 0.018599819 0.018736522 0.019270447 0.020336567 0.021101259 0.021150293 0.022257056 0.023023603 0.024711008 0.025619529 0.026179428 0.026409394 0.026814058 0.028629116 0.029109311 0.030901269 0.031709257 0.032049159 0.033168577 0.033878550 0.035485417 0.035970199 0.038064643 0.038703926 0.039990352 0.040315132 0.041271457 0.044171249 0.044842525 0.045048548 0.046789932 0.049097222 0.050002962 0.050542951 0.050774631 0.051138640 0.052414959 0.052459930 0.052743701 0.052832665 0.054122487 0.054496572 0.055226865 0.055744246 0.056375971 0.056459567 0.056885483 0.058095274 0.059728276 0.060434760 0.061294642 0.061591817 0.062570521 0.063084842 0.064715746 0.065013571 0.066146762 0.067376850 0.067588491 0.068485513 0.071766408 0.072418250 0.073965493 0.075723203 0.077306347 0.083183615 0.084561059 0.086363018 0.086794060 0.087358854 0.089941920 0.090250847 0.092742186 0.094483647 0.094572267 0.096166731 0.096829299 0.097543241 0.098389879 0.099351683 0.100011107 0.101564284 0.101944013 0.102664130 0.103099246 0.103806035 0.103899419 0.106185143 0.106668860 0.106979333 0.108798896 0.109726952 0.110437491 0.112017558 0.112627262 0.114407430 0.115976206 0.118608127 0.120119373 0.120890011 0.121688136 0.123395053 0.125021310 0.126096913 0.126765831 0.131357754 0.134639094 0.135370412 0.142291175 0.143140976 0.146609642 0.146966286 0.149416881 0.151222164 0.154018969 0.154762249 0.156364466 0.160058524 0.161431351 0.173035784 0.173601431 0.178131717 0.183690287 0.184574639 0.188839424 0.189757376 0.192933281 0.193651538 0.197779537 0.199616102 0.204295481 0.206654376 0.206784887 0.209646946 0.210683464 0.214178691 0.216187191 0.217142220 0.219653419 0.224618463 0.225922853 0.231500922 0.234588216 0.234930224 0.235465879 0.244276652 0.255392391 0.256822848 0.262373577 0.267207112 0.278744014 0.282750787 0.286113153 0.289811810 0.294602878 0.303785361 0.305411857 0.306311575 0.308070399 0.315116794 0.316140870 0.321822925 0.327748664 0.330638418 0.349412170 0.351131264 0.353423514 0.355077169 0.359441146 0.361807900 0.362271224 0.379267288 0.383757980 0.390980421 0.410006380 0.424913633 0.429235103 0.450742026 0.467219241 0.470077948 0.475768793 0.481793990 0.484578912 0.489452765 0.506060292 0.513069734 0.534289134 0.565748691 0.572363527 0.590495467 0.592799781 0.604910702 0.606108513 0.641509369 0.645075991 0.646529800 0.673696652 0.675587626 0.684389773 0.691286756 0.692077533 0.699014612 0.703940207 0.715341905 0.740627170 0.751004815 0.755221384 0.762659544 0.772094202 0.778514434 0.810106132 0.810584817 0.813182541 0.820725378 0.821320211 0.825480217 0.831005125 0.834406626 0.835602397 0.844725599 0.845169434 0.847235603 0.857762266 0.864281923 0.864767862 0.872700197 0.879426442 0.883700536 0.888989242 0.891713936 0.899998713 0.901926624 0.920030770 0.923087060 0.932136208 0.934528752 0.964389062 0.975563488 0.985103886 1.000446276 1.015235656 1.025956472 1.040703391 1.048909185 1.056258308 1.065331786 1.086039189 1.088102321 1.102968759 1.105497011 1.112101541 1.115407290 1.123193636 1.135031793 1.139963787 1.170655942 1.173652504 1.179943721 1.184982648 1.188104790 1.194310792 1.218886533 1.224502542 1.271335352 1.298911253 1.317083166 1.327382532 1.331012514 1.332697187 1.333872529 1.335380729 1.342253929 1.344787394 1.358137810 1.375046405 1.382280600 1.383410108 1.391952688 1.419325110 1.423373851 1.551239891 1.660536815 1.773148499</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">126</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33518233" y3="0.08183135" z3="-0.19357827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38272542" y3="0.17121652" z3="0.41538876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64803651" y3="0.4508905" z3="-0.34584723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74282798" y3="1.25456973" z3="-2.27583807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38955812" y3="0.47040371" z3="-1.18938034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74341177" y3="0.86949885" z3="-3.67647837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65763372" y3="1.76847814" z3="-3.15954014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.42139403" y3="2.61508254" z3="-4.66347892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58369303" y3="1.27634872" z3="-4.40021631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54847871" y3="2.95175334" z3="-5.23142859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92260973" y3="-0.45996712" z3="-3.43766997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09404984" y3="0.0988499" z3="-1.00409561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3894173" y3="-1.05073886" z3="-1.99146885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91864436" y3="-0.90763494" z3="-1.82311011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08365493" y3="-2.37776782" z3="-1.82166666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15128387" y3="-3.63893015" z3="0.69112117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01030314" y3="-5.19341881" z3="-4.74849259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24048093" y3="-4.9556955" z3="-3.7064728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84334694" y3="-4.31544756" z3="-1.07635021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77867012" y3="-4.53836277" z3="-2.85234087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55299075" y3="-5.07865869" z3="-3.2462926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8554086" y3="-4.75376709" z3="-1.92620979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48938173" y3="-4.2323926" z3="-1.52098296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80816253" y3="-4.43083012" z3="-3.20173405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3474039" y3="-5.39797959" z3="-3.92432065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88988995" y3="-4.81824084" z3="-1.57957908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03712082" y3="-3.88611505" z3="0.25008567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17973622" y3="-3.68034762" z3="0.89392411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06488434" y3="-4.14574385" z3="0.45769382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17533043" y3="-3.55324704" z3="2.36187045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23279909" y3="-3.38189982" z3="5.1606267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36805463" y3="-3.77682212" z3="3.06524276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01136971" y3="-3.24942095" z3="3.08381989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03735389" y3="-3.16402643" z3="4.47281479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39572313" y3="-3.69371277" z3="4.45463759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28067786" y3="-4.02572369" z3="2.5166043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05436272" y3="-3.09946733" z3="2.57892653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11028659" y3="-2.94598012" z3="5.01071284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33083853" y3="-3.87984337" z3="4.98989432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25278207" y3="-3.32327555" z3="6.25246922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40179779" y3="-3.85808475" z3="-0.61456099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1593723" y3="-3.34462485" z3="-1.06318323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53526801" y3="0.27460827" z3="-4.72608964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09220968" y3="-1.75685185" z3="0.04407623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93040184" y3="-1.01297351" z3="1.2126647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.87715678" y3="-0.35540559" z3="1.55839414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.40934034" y3="0.53121179" z3="1.25916673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.51680192" y3="1.46100404" z3="-0.348838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95470026" y3="-0.7170232" z3="1.39357662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38493664" y3="1.69179569" z3="2.72925824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.91058336" y3="-1.01931115" z3="2.10458022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.69689098" y3="-0.41184383" z3="3.36865236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.25774368" y3="0.79310721" z3="-1.18870046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.23104037" y3="2.27537057" z3="-0.32978275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.51188381" y3="1.9161894" z3="-0.50001368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00298854" y3="-1.09487563" z3="2.42808472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91984841" y3="-0.2424333" z3="1.14651092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82618985" y3="-1.55088233" z3="0.68483366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42660944" y3="1.12999849" z3="3.67939043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54852915" y3="2.28325768" z3="2.7293735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23070454" y3="2.40176343" z3="2.70665246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.83440229" y3="-0.86265483" z3="3.88427713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.61408398" y3="-0.59899987" z3="3.94253932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.53619918" y3="0.67289217" z3="3.25685128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82643556" y3="-0.66540398" z3="0.99169334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4203721" y3="-1.99953067" z3="0.86264793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76779426" y3="-2.64435205" z3="1.90617854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53771015" y3="-1.94163577" z3="3.08522829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99338451" y3="-0.63970795" z3="3.27053998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64594025" y3="-0.00851464" z3="2.21621273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54274706" y3="-2.50598821" z3="-0.09616909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38770669" y3="-3.66010223" z3="1.78980261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67629869" y3="-2.54381862" z3="4.10792924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.79358352" y3="-0.12230062" z3="4.20946704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.97266237" y3="1.02941272" z3="2.32384895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77426407" y3="0.49866472" z3="-4.28339205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.75849769" y3="-0.46714753" z3="-4.44682847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42244992" y3="-1.65888913" z3="-5.07628274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14385605" y3="-1.89344241" z3="-5.57356735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83367009" y3="-0.9253269" z3="-5.38597133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0088326" y3="1.4226256" z3="-3.74804605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77027093" y3="-0.31768626" z3="-4.07185065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43891745" y3="-2.70522815" z3="-5.20507006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07628561" y3="-2.83348719" z3="-6.07883047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85467572" y3="-1.10812405" z3="-5.73904255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.32706447" y3="-1.84521656" z3="5.03923541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31956743" y3="-3.69243674" z3="3.94889975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2268974" y3="-3.60731972" z3="-5.98701666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43364857" y3="-2.61765343" z3="-4.51211578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08445937" y3="1.15443506" z3="-1.50142675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13111286" y3="1.54718626" z3="-2.48553867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45858609" y3="1.45775881" z3="-1.70185038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88085235" y3="2.10128457" z3="-2.83914141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17876355" y3="1.15701074" z3="-0.93474033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94124786" y3="2.32280279" z3="-2.98550875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.60405753" y3="2.19368174" z3="-3.66166455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94054838" y3="2.46223358" z3="-3.83367938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88859926" y3="2.46704606" z3="-4.4406282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.28143202" y3="2.95282509" z3="-4.74983695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.44693554" y3="3.17116236" z3="-3.38334437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.34012081" y3="3.58439248" z3="-4.18230578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2678822" y3="4.18131271" z3="-2.8070712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.03824283" y3="5.51315296" z3="-3.05828071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.08982802" y3="3.89334093" z3="-2.14988189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.68609248" y3="6.2677447" z3="-2.60386132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.1365099" y3="4.96910497" z3="-4.43514943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.97004408" y3="5.91637542" z3="-3.8942097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.29147293" y3="5.26748369" z3="-5.06331887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.8027322" y3="6.97852453" z3="-4.09348569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48514256" y3="-2.24147144" z3="-0.28789279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44497816" y3="-3.02536628" z3="-1.06320688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01568041" y3="-2.63709709" z3="0.59310179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10361173" y3="-1.42180761" z3="-0.70038855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18462081" y3="-1.44276182" z3="-1.11887788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32931098" y3="-0.40065241" z3="-1.45904492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1086448" y3="-1.55911133" z3="-0.90846793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4140216" y3="-2.09201438" z3="-1.97681204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3352,.0818,-.1936;7.3827,.1712,.4154;6.648,.4509,-.3458;4.7428,1.2546,-2.2758;4.3896,.4704,-1.1894;2.7434,.8695,-3.6765;3.6576,1.7685,-3.1595;1.4214,2.6151,-4.6635;1.5837,1.2763,-4.4002;.5485,2.9518,-5.2314;2.9226,-.46,-3.4377;3.094,.0988,-1.0041;2.3894,-1.0507,-1.9915;.9186,-.9076,-1.8231;3.0837,-2.3778,-1.8217;-.1513,-3.6389,.6911;-.0103,-5.1934,-4.7485;-.2405,-4.9557,-3.7065;-.8433,-4.3154,-1.0764;.7787,-4.5384,-2.8523;-1.553,-5.0787,-3.2463;-1.8554,-4.7538,-1.9262;.4894,-4.2324,-1.521;1.8082,-4.4308,-3.2017;-2.3474,-5.398,-3.9243;-2.8899,-4.8182,-1.5796;-1.0371,-3.8861,.2501;-2.1797,-3.6803,.8939;-3.0649,-4.1457,.4577;-2.1753,-3.5532,2.3619;-2.2328,-3.3819,5.1606;-3.3681,-3.7768,3.0652;-1.0114,-3.2494,3.0838;-1.0374,-3.164,4.4728;-3.3957,-3.6937,4.4546;-4.2807,-4.0257,2.5166;-.0544,-3.0995,2.5789;-.1103,-2.946,5.0107;-4.3308,-3.8798,4.9899;-2.2528,-3.3233,6.2525;1.4018,-3.8581,-.6146;2.1594,-3.3446,-1.0632;.5353,.2746,-4.7261;-3.0922,-1.7569,.0441;-2.9304,-1.013,1.2127;-1.8772,-.3554,1.5584;-.4093,.5312,1.2592;-.5168,1.461,-.3488;.9547,-.717,1.3936;-.3849,1.6918,2.7293;-3.9106,-1.0193,2.1046;-3.6969,-.4118,3.3687;-.2577,.7931,-1.1887;.231,2.2754,-.3298;-1.5119,1.9162,-.5;1.003,-1.0949,2.4281;1.9198,-.2424,1.1465;.8262,-1.5509,.6848;-.4266,1.13,3.6794;.5485,2.2833,2.7294;-1.2307,2.4018,2.7067;-2.8344,-.8627,3.8843;-4.6141,-.599,3.9425;-3.5362,.6729,3.2569;4.8264,-.6654,.9917;4.4204,-1.9995,.8626;3.7678,-2.6444,1.9062;3.5377,-1.9416,3.0852;3.9934,-.6397,3.2705;4.6459,-.0085,2.2162;4.5427,-2.506,-.0962;3.3877,-3.6601,1.7898;2.6763,-2.5438,4.1079;3.7936,-.1223,4.2095;4.9727,1.0294,2.3238;-.7743,.4987,-4.2834;-1.7585,-.4671,-4.4468;-1.4224,-1.6589,-5.0763;-.1439,-1.8934,-5.5736;.8337,-.9253,-5.386;-1.0088,1.4226,-3.748;-2.7703,-.3177,-4.0719;-2.4389,-2.7052,-5.2051;.0763,-2.8335,-6.0788;1.8547,-1.1081,-5.739;2.3271,-1.8452,5.0392;2.3196,-3.6924,3.9489;-2.2269,-3.6073,-5.987;-3.4336,-2.6177,-4.5121;7.0845,1.1544,-1.5014;6.1311,1.5472,-2.4855;8.4586,1.4578,-1.7019;8.8809,2.1013,-2.8391;9.1788,1.157,-.9347;9.9412,2.3228,-2.9855;6.6041,2.1937,-3.6617;7.9405,2.4622,-3.8337;5.8886,2.467,-4.4406;8.2814,2.9528,-4.7498;3.4469,3.1712,-3.3833;2.3401,3.5844,-4.1823;4.2679,4.1813,-2.8071;4.0382,5.5132,-3.0583;5.0898,3.8933,-2.1499;4.6861,6.2677,-2.6039;2.1365,4.9691,-4.4351;2.97,5.9164,-3.8942;1.2915,5.2675,-5.0633;2.8027,6.9785,-4.0935;-4.4851,-2.2415,-.2879;-4.445,-3.0254,-1.0632;-5.0157,-2.6371,.5931;-5.1036,-1.4218,-.7004;-2.1846,-1.4428,-1.1189;-2.3293,-.4007,-1.459;-1.1086,-1.5591,-.9085;-2.414,-2.092,-1.9768;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650369602437</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003124121091 0.000513500507 0.022503118234 0.005342133028</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030483773 -0.001425731 0.000147289 0.000241454 0.000277699 0.000377169 0.000386303 0.000448974 0.000602626 0.000711539 0.000909539 0.001075174 0.001161987 0.001219521 0.001304485 0.001363487 0.001535883 0.001723002 0.001749071 0.001881006 0.001976232 0.002337982 0.002394436 0.002586419 0.002710703 0.003055426 0.003128390 0.003318045 0.003733160 0.003788969 0.004137099 0.004567688 0.004821221 0.004881976 0.005720694 0.005873127 0.005951637 0.006300354 0.006650051 0.007412949 0.007794337 0.007945074 0.008781773 0.009178841 0.009653226 0.010402595 0.010871469 0.011342661 0.011642629 0.011934187 0.012671473 0.013051129 0.013761174 0.013960672 0.014664516 0.015143513 0.015434491 0.015521432 0.015868858 0.016578265 0.017181589 0.017301538 0.018613190 0.018741127 0.019286387 0.020336689 0.021111885 0.021153390 0.022257309 0.023024295 0.024721430 0.025631005 0.026185957 0.026443665 0.026814069 0.028650196 0.029115819 0.030911252 0.031728791 0.032056929 0.033170752 0.033884725 0.035486277 0.035996577 0.038064840 0.038737383 0.040001724 0.040317070 0.041271221 0.044171453 0.044846797 0.045056636 0.046794616 0.049097279 0.050003021 0.050543850 0.050774379 0.051138836 0.052415025 0.052460005 0.052747360 0.052836236 0.054122541 0.054521906 0.055226881 0.055775155 0.056378259 0.056459612 0.056886327 0.058126813 0.059728356 0.060435516 0.061294631 0.061596170 0.062582865 0.063096937 0.064738794 0.065014186 0.066153016 0.067378384 0.068011038 0.068771875 0.072085762 0.072418792 0.073966963 0.075741405 0.077309245 0.083188254 0.084561936 0.086362846 0.086797059 0.087360525 0.089957082 0.090254581 0.092751387 0.094495831 0.094584087 0.096167795 0.096839150 0.097544104 0.098398499 0.099351627 0.100011133 0.101565787 0.101945902 0.102664203 0.103099692 0.103808532 0.103899608 0.106193946 0.106670091 0.106983225 0.108799620 0.109751483 0.110448901 0.112019876 0.112627145 0.114409038 0.115980803 0.118612063 0.120125637 0.120904512 0.121697856 0.123396229 0.125022845 0.126098829 0.126766294 0.131358044 0.134639814 0.135372271 0.142291916 0.143147534 0.146609784 0.146969944 0.149425358 0.151283682 0.154036386 0.155099492 0.156380319 0.160064921 0.161431227 0.173045600 0.173603231 0.178141508 0.183700537 0.184593994 0.188839493 0.189762002 0.192933884 0.193652913 0.197787832 0.199618541 0.204294758 0.206658720 0.206786075 0.209646983 0.210756871 0.214179049 0.216260644 0.217143807 0.219712597 0.224620071 0.225925556 0.231505596 0.234588350 0.234930979 0.235467824 0.244278374 0.255400934 0.256823489 0.262399137 0.267208117 0.278776564 0.282750925 0.286113452 0.289827015 0.294696970 0.303933778 0.305414556 0.306460690 0.308395801 0.315204056 0.316140906 0.321823178 0.327751772 0.330720163 0.349417330 0.351135733 0.353444678 0.355082986 0.359445113 0.361810290 0.362271467 0.379311487 0.383759191 0.390987436 0.410006862 0.424914436 0.429242891 0.450742110 0.467243607 0.470079454 0.475770024 0.481795310 0.484864296 0.489453592 0.506342944 0.513123462 0.534335685 0.565764616 0.572406213 0.590535235 0.592806445 0.604912247 0.606109570 0.641544785 0.645080236 0.646546278 0.673696661 0.675655765 0.684389918 0.691287204 0.692079488 0.699014842 0.703940258 0.715372293 0.740644731 0.751042369 0.755870892 0.762707242 0.772096090 0.778548148 0.810107636 0.810610061 0.813183029 0.820733001 0.821357504 0.825507235 0.831005098 0.834561006 0.835632147 0.844735502 0.845169434 0.847235672 0.857763602 0.864293865 0.864768836 0.872735972 0.879647349 0.883717133 0.889008775 0.891714008 0.900150273 0.902168499 0.920032735 0.923088847 0.932136267 0.934531190 0.964393299 0.975564097 0.985131083 1.000463049 1.015519278 1.025965895 1.040727757 1.048927675 1.056294274 1.065546949 1.086041124 1.088107024 1.103074306 1.105502348 1.112108753 1.116047079 1.123195117 1.135031960 1.139964766 1.170659167 1.173668460 1.179961469 1.185119688 1.188111836 1.194312318 1.219577339 1.224505635 1.271399882 1.298916803 1.317089861 1.327388222 1.331012473 1.332756874 1.334045863 1.335387818 1.342271922 1.344787612 1.358137971 1.375046542 1.382322170 1.383412089 1.392195163 1.419325153 1.423480817 1.551240336 1.660538260 1.773178558</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">127</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33353889" y3="0.08674792" z3="-0.19343234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38104429" y3="0.17338546" z3="0.41631405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64700987" y3="0.4529533" z3="-0.34570317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7441731" y3="1.2574761" z3="-2.27766771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38905119" y3="0.47612307" z3="-1.18995447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74608432" y3="0.87205274" z3="-3.68032872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66113402" y3="1.77084571" z3="-3.16432627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.42759274" y3="2.61820338" z3="-4.67259201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58800032" y3="1.27973564" z3="-4.40612065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.55496635" y3="2.95582533" z3="-5.24029024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92166826" y3="-0.45650362" z3="-3.43714717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09294007" y3="0.10715546" z3="-1.00456875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38724616" y3="-1.04327258" z3="-1.99007339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91657654" y3="-0.8985544" z3="-1.82255966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07958976" y3="-2.37100592" z3="-1.81779272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15314368" y3="-3.64370076" z3="0.69347257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01293013" y3="-5.18493794" z3="-4.75016308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24324678" y3="-4.94890625" z3="-3.70774141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84616511" y3="-4.3144594" z3="-1.07594217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77568423" y3="-4.5309555" z3="-2.85350995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55506925" y3="-5.07604057" z3="-3.24663743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85724961" y3="-4.75471311" z3="-1.92565213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48645126" y3="-4.22773898" z3="-1.52140994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80536439" y3="-4.42204155" z3="-3.2029036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34882503" y3="-5.39695443" z3="-3.92448905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89014129" y3="-4.82576439" z3="-1.57798456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03960208" y3="-3.88898265" z3="0.25172452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.18196338" y3="-3.68433378" z3="0.89609424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06725918" y3="-4.14880197" z3="0.45924176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17712263" y3="-3.55867968" z3="2.36411132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2330793" y3="-3.38960055" z3="5.16298718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36915458" y3="-3.78415362" z3="3.06790761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01311149" y3="-3.25395517" z3="3.08565845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03830281" y3="-3.16962354" z3="4.47471982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39603516" y3="-3.70221753" z3="4.45741951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28179617" y3="-4.03354392" z3="2.51957665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05689194" y3="-3.10180887" z3="2.58017403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11132116" y3="-2.9502709" z3="5.01213595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33073452" y3="-3.88955477" z3="4.99314629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25251453" y3="-3.33181798" z3="6.25488325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40023974" y3="-3.85482071" z3="-0.61444737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.15478611" y3="-3.33760513" z3="-1.06156986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53901838" y3="0.27948239" z3="-4.72906151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.093675" y3="-1.75915014" z3="0.04762173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93407945" y3="-1.01773536" z3="1.21770398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.88131011" y3="-0.36062249" z3="1.56649986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.41413468" y3="0.52639704" z3="1.26671442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.52498368" y3="1.46222555" z3="-0.33742689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95149176" y3="-0.71974736" z3="1.39324368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3858899" y3="1.68098572" z3="2.74146658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.91576288" y3="-1.02591557" z3="2.10782709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.70340298" y3="-0.41958744" z3="3.37316276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.26221481" y3="0.79891643" z3="-1.17906745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.22184506" y3="2.27846945" z3="-0.31481259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.52106067" y3="1.91381374" z3="-0.48836451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00331723" y3="-1.09888204" z3="2.42692093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91478641" y3="-0.24266249" z3="1.14454274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82398353" y3="-1.55246454" z3="0.68362805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4243423" y3="1.11519543" z3="3.68925189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54779076" y3="2.27259258" z3="2.74121939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23202237" y3="2.39065491" z3="2.72412709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.83920471" y3="-0.86936412" z3="3.88781375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.62013759" y3="-0.60936361" z3="3.94728094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.54517353" y3="0.66544993" z3="3.26239313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82381664" y3="-0.65970429" z3="0.99203839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42095833" y3="-1.99494022" z3="0.86415719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76897602" y3="-2.64004107" z3="1.90787926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53590327" y3="-1.93637463" z3="3.085747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98785607" y3="-0.63292304" z3="3.2698177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64023568" y3="-0.00156932" z3="2.21554037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54586652" y3="-2.50257933" z3="-0.09356154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39158224" y3="-3.65686975" z3="1.7925476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67470677" y3="-2.5394591" z3="4.10808346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.78559746" y3="-0.1146704" z3="4.20785827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.96475933" y3="1.03723926" z3="2.32245486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77134857" y3="0.50210096" z3="-4.28330011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.75553071" y3="-0.46475745" z3="-4.44646897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41989756" y3="-1.65673761" z3="-5.07947244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14097109" y3="-1.88888266" z3="-5.5757644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83702556" y3="-0.91970815" z3="-5.38931911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00553306" y3="1.42592983" z3="-3.74846898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.76924109" y3="-0.31888941" z3="-4.06958908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43654344" y3="-2.70392742" z3="-5.20715226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08030728" y3="-2.82911347" z3="-6.08137079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84961161" y3="-1.1122919" z3="-5.73618644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.32135324" y3="-1.83980669" z3="5.03747636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32198322" y3="-3.68993866" z3="3.95042485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22581465" y3="-3.60563775" z3="-5.9897249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42989448" y3="-2.61580667" z3="-4.51363012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08504671" y3="1.15372199" z3="-1.50212684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13277313" y3="1.54677834" z3="-2.48713164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46005064" y3="1.4549706" z3="-1.70228093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8839474" y3="2.09602299" z3="-2.84038028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17954945" y3="1.15404664" z3="-0.93448509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94519315" y3="2.31658624" z3="-2.98647273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.60724231" y3="2.1909062" z3="-3.66387502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94445414" y3="2.45747411" z3="-3.83560192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89262567" y3="2.4661768" z3="-4.44288201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.28648999" y3="2.94629436" z3="-4.75223615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.45297418" y3="3.17371269" z3="-3.39214221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.34769147" y3="3.58724015" z3="-4.19313503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.27506024" y3="4.1842318" z3="-2.81775914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.04848286" y3="5.51578205" z3="-3.07329417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0962057" y3="3.89598364" z3="-2.15951394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.69617569" y3="6.27146778" z3="-2.61880695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.14755246" y3="4.9712179" z3="-4.45108296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.98252756" y3="5.91843244" z3="-3.91229426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.30393436" y3="5.26900141" z3="-5.08153954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.81823556" y3="6.98007581" z3="-4.11598881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48602657" y3="-2.24404876" z3="-0.28663641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44490795" y3="-3.02669163" z3="-1.06316897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01697843" y3="-2.6412055" z3="0.59359529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10469297" y3="-1.42404315" z3="-0.69809395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18438166" y3="-1.44286641" z3="-1.11357547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3301452" y3="-0.40126688" z3="-1.45350279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10818798" y3="-1.5582927" z3="-0.90215191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41231347" y3="-2.09155539" z3="-1.97273605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3335,.0867,-.1934;7.381,.1734,.4163;6.647,.453,-.3457;4.7442,1.2575,-2.2777;4.3891,.4761,-1.19;2.7461,.8721,-3.6803;3.6611,1.7708,-3.1643;1.4276,2.6182,-4.6726;1.588,1.2797,-4.4061;.555,2.9558,-5.2403;2.9217,-.4565,-3.4371;3.0929,.1072,-1.0046;2.3872,-1.0433,-1.9901;.9166,-.8986,-1.8226;3.0796,-2.371,-1.8178;-.1531,-3.6437,.6935;-.0129,-5.1849,-4.7502;-.2432,-4.9489,-3.7077;-.8462,-4.3145,-1.0759;.7757,-4.531,-2.8535;-1.5551,-5.076,-3.2466;-1.8572,-4.7547,-1.9257;.4865,-4.2277,-1.5214;1.8054,-4.422,-3.2029;-2.3488,-5.397,-3.9245;-2.8901,-4.8258,-1.578;-1.0396,-3.889,.2517;-2.182,-3.6843,.8961;-3.0673,-4.1488,.4592;-2.1771,-3.5587,2.3641;-2.2331,-3.3896,5.163;-3.3692,-3.7842,3.0679;-1.0131,-3.254,3.0857;-1.0383,-3.1696,4.4747;-3.396,-3.7022,4.4574;-4.2818,-4.0335,2.5196;-.0569,-3.1018,2.5802;-.1113,-2.9503,5.0121;-4.3307,-3.8896,4.9931;-2.2525,-3.3318,6.2549;1.4002,-3.8548,-.6144;2.1548,-3.3376,-1.0616;.539,.2795,-4.7291;-3.0937,-1.7592,.0476;-2.9341,-1.0177,1.2177;-1.8813,-.3606,1.5665;-.4141,.5264,1.2667;-.525,1.4622,-.3374;.9515,-.7197,1.3932;-.3859,1.681,2.7415;-3.9158,-1.0259,2.1078;-3.7034,-.4196,3.3732;-.2622,.7989,-1.1791;.2218,2.2785,-.3148;-1.5211,1.9138,-.4884;1.0033,-1.0989,2.4269;1.9148,-.2427,1.1445;.824,-1.5525,.6836;-.4243,1.1152,3.6893;.5478,2.2726,2.7412;-1.232,2.3907,2.7241;-2.8392,-.8694,3.8878;-4.6201,-.6094,3.9473;-3.5452,.6654,3.2624;4.8238,-.6597,.992;4.421,-1.9949,.8642;3.769,-2.64,1.9079;3.5359,-1.9364,3.0857;3.9879,-.6329,3.2698;4.6402,-.0016,2.2155;4.5459,-2.5026,-.0936;3.3916,-3.6569,1.7925;2.6747,-2.5395,4.1081;3.7856,-.1147,4.2079;4.9648,1.0372,2.3225;-.7713,.5021,-4.2833;-1.7555,-.4648,-4.4465;-1.4199,-1.6567,-5.0795;-.141,-1.8889,-5.5758;.837,-.9197,-5.3893;-1.0055,1.4259,-3.7485;-2.7692,-.3189,-4.0696;-2.4365,-2.7039,-5.2072;.0803,-2.8291,-6.0814;1.8496,-1.1123,-5.7362;2.3214,-1.8398,5.0375;2.322,-3.6899,3.9504;-2.2258,-3.6056,-5.9897;-3.4299,-2.6158,-4.5136;7.085,1.1537,-1.5021;6.1328,1.5468,-2.4871;8.4601,1.455,-1.7023;8.8839,2.096,-2.8404;9.1795,1.154,-.9345;9.9452,2.3166,-2.9865;6.6072,2.1909,-3.6639;7.9445,2.4575,-3.8356;5.8926,2.4662,-4.4429;8.2865,2.9463,-4.7522;3.453,3.1737,-3.3921;2.3477,3.5872,-4.1931;4.2751,4.1842,-2.8178;4.0485,5.5158,-3.0733;5.0962,3.896,-2.1595;4.6962,6.2715,-2.6188;2.1476,4.9712,-4.4511;2.9825,5.9184,-3.9123;1.3039,5.269,-5.0815;2.8182,6.9801,-4.116;-4.486,-2.244,-.2866;-4.4449,-3.0267,-1.0632;-5.017,-2.6412,.5936;-5.1047,-1.424,-.6981;-2.1844,-1.4429,-1.1136;-2.3301,-.4013,-1.4535;-1.1082,-1.5583,-.9022;-2.4123,-2.0916,-1.9727;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650359291834</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002971305907 0.000476632881 0.019328821961 0.005339910116</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030491966 -0.001327677 0.000148066 0.000240964 0.000277670 0.000376906 0.000388265 0.000451524 0.000603193 0.000712000 0.000909977 0.001075847 0.001167926 0.001225354 0.001304739 0.001364644 0.001535944 0.001724416 0.001749102 0.001885856 0.001985176 0.002339487 0.002408337 0.002586483 0.002712089 0.003056888 0.003143292 0.003318667 0.003742274 0.003790661 0.004147887 0.004575140 0.004826889 0.004883650 0.005724863 0.005880680 0.005966404 0.006300543 0.006650023 0.007412117 0.007793381 0.007947118 0.008794707 0.009193805 0.009654074 0.010402584 0.010876262 0.011342248 0.011649659 0.011944527 0.012671693 0.013051052 0.013782326 0.013964255 0.014664604 0.015148387 0.015438513 0.015521488 0.015869380 0.016578561 0.017187234 0.017303678 0.018620010 0.018743815 0.019315496 0.020336688 0.021119631 0.021156364 0.022257596 0.023025403 0.024731388 0.025639172 0.026198840 0.026477268 0.026827812 0.028652933 0.029128019 0.030911974 0.031766710 0.032087627 0.033181974 0.033896832 0.035486822 0.036011643 0.038066962 0.038770290 0.040005870 0.040317478 0.041273766 0.044171882 0.044846008 0.045058034 0.046796320 0.049097307 0.050002942 0.050543838 0.050776224 0.051139370 0.052415024 0.052460055 0.052750945 0.052838303 0.054122624 0.054543896 0.055227086 0.055794480 0.056380578 0.056459841 0.056889415 0.058144796 0.059728657 0.060435604 0.061294797 0.061599699 0.062601400 0.063113962 0.064760454 0.065014763 0.066158547 0.067379650 0.068127415 0.069084346 0.072406019 0.072480157 0.073967318 0.075765265 0.077310751 0.083197463 0.084562405 0.086364207 0.086798247 0.087366311 0.089964246 0.090255715 0.092754439 0.094517098 0.094630071 0.096167739 0.096843201 0.097545557 0.098415922 0.099352447 0.100013109 0.101588620 0.101945778 0.102664352 0.103099842 0.103809093 0.103900035 0.106208499 0.106671088 0.106994368 0.108803128 0.109790285 0.110506883 0.112022238 0.112631335 0.114409172 0.115982885 0.118622224 0.120145839 0.120935140 0.121713273 0.123398860 0.125023327 0.126099195 0.126767009 0.131358389 0.134640975 0.135375155 0.142292344 0.143147986 0.146611765 0.146969768 0.149428609 0.151338822 0.154056444 0.155378820 0.156412973 0.160071466 0.161433482 0.173051242 0.173605991 0.178141423 0.183708971 0.184602716 0.188839522 0.189763951 0.192933887 0.193655543 0.197795594 0.199619747 0.204302599 0.206658678 0.206786034 0.209646989 0.210818107 0.214185068 0.216321646 0.217149531 0.219760920 0.224622952 0.225925509 0.231506512 0.234588894 0.234933109 0.235468307 0.244282511 0.255413346 0.256825183 0.262413530 0.267219351 0.278804823 0.282750948 0.286114173 0.289826572 0.294771293 0.303994962 0.305415843 0.306568726 0.308833058 0.315264649 0.316149689 0.321823572 0.327763405 0.330801693 0.349425570 0.351135678 0.353457935 0.355086326 0.359462112 0.361818340 0.362272585 0.379314129 0.383771937 0.390988317 0.410011076 0.424916837 0.429247577 0.450747429 0.467304959 0.470112939 0.475770693 0.481804952 0.485099153 0.489456230 0.506600347 0.513180547 0.534391255 0.565771119 0.572440571 0.590558340 0.592822119 0.604925526 0.606109617 0.641585608 0.645094265 0.646552337 0.673697750 0.675725505 0.684390317 0.691287254 0.692079836 0.699014954 0.703940466 0.715414139 0.740675829 0.751059689 0.756466123 0.762762220 0.772101651 0.778562010 0.810108493 0.810704377 0.813193079 0.820742142 0.821370706 0.825544707 0.831005107 0.834633884 0.835658121 0.844738623 0.845169566 0.847249324 0.857764902 0.864301084 0.864769838 0.872754767 0.879814805 0.883741838 0.889019722 0.891714167 0.900228896 0.902383443 0.920033144 0.923090795 0.932139712 0.934532636 0.964394268 0.975564420 0.985140984 1.000477920 1.015676227 1.025977047 1.040748522 1.048940303 1.056343588 1.065765554 1.086042668 1.088114237 1.103127863 1.105507506 1.112115885 1.116710548 1.123195328 1.135031958 1.139980262 1.170663552 1.173672180 1.179978522 1.185207551 1.188111831 1.194313056 1.220176154 1.224505784 1.271421623 1.298941071 1.317121857 1.327407721 1.331022611 1.332808802 1.334383160 1.335402811 1.342277586 1.344788139 1.358141231 1.375046680 1.382337266 1.383413265 1.392245639 1.419329603 1.423503814 1.551241992 1.660539966 1.773183196</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">128</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33217593" y3="0.09070431" z3="-0.19357106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3795402" y3="0.17449678" z3="0.41671482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64638918" y3="0.45471833" z3="-0.34580419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74558564" y3="1.25922089" z3="-2.27990375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38865374" y3="0.48058664" z3="-1.19073416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74732101" y3="0.8744693" z3="-3.6819182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66361044" y3="1.77288294" z3="-3.16775483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.43350426" y3="2.61904653" z3="-4.68163569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59050336" y3="1.28162804" z3="-4.40999766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.56268649" y3="2.95563475" z3="-5.25299704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92129964" y3="-0.4543639" z3="-3.4363823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0917477" y3="0.11471834" z3="-1.0049614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38460562" y3="-1.03669257" z3="-1.98818289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91407906" y3="-0.88882709" z3="-1.82210031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07567159" y3="-2.36462632" z3="-1.81243851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15554784" y3="-3.64472341" z3="0.69424789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01290581" y3="-5.17834743" z3="-4.7505311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24311356" y3="-4.94500592" z3="-3.70749243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84688327" y3="-4.31558829" z3="-1.07511366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77503502" y3="-4.5258399" z3="-2.85292708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5547992" y3="-5.07499866" z3="-3.24675866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85774741" y3="-4.755612" z3="-1.92540164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48535461" y3="-4.22521892" z3="-1.52038883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80326196" y3="-4.41186158" z3="-3.20280549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34877366" y3="-5.39491597" z3="-3.92537396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89215084" y3="-4.82491131" z3="-1.57787872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04127426" y3="-3.89112873" z3="0.25266211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.18392297" y3="-3.68680599" z3="0.89689338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06904343" y3="-4.15144998" z3="0.46003364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17856299" y3="-3.56319655" z3="2.36521665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23297113" y3="-3.39829186" z3="5.16446471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36960562" y3="-3.79199205" z3="3.06949221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01462841" y3="-3.25749986" z3="3.08653228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03903518" y3="-3.17513711" z3="4.47572403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3956679" y3="-3.71223232" z3="4.45917923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28199919" y3="-4.04263553" z3="2.52147876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05864947" y3="-3.10342109" z3="2.58072886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11179115" y3="-2.95514983" z3="5.01284467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32938007" y3="-3.90261546" z3="4.99525464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25176903" y3="-3.34220304" z3="6.25646929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39588786" y3="-3.84919418" z3="-0.61309789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.15213176" y3="-3.33168683" z3="-1.05971672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.54034589" y3="0.28011772" z3="-4.73312071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09511208" y3="-1.76179863" z3="0.05080067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93694309" y3="-1.02148053" z3="1.22219096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8851619" y3="-0.36391228" z3="1.57287642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.41777242" y3="0.52425184" z3="1.27412856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.53178852" y3="1.46414673" z3="-0.32732978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94731709" y3="-0.7249944" z3="1.39341187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38773106" y3="1.67308716" z3="2.75310368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.91932359" y3="-1.03192365" z3="2.11158477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.70866302" y3="-0.42858634" z3="3.37849623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.26988312" y3="0.80296986" z3="-1.171955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.21050174" y3="2.28275212" z3="-0.3033675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.52967625" y3="1.91528726" z3="-0.47458702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99993565" y3="-1.10949409" z3="2.42552408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91277943" y3="-0.2493189" z3="1.14577231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81458582" y3="-1.55531916" z3="0.68003122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42434108" y3="1.10302542" z3="3.69852133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54547315" y3="2.26530874" z3="2.75395194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23439671" y3="2.38249278" z3="2.74041237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.84566408" y3="-0.88050894" z3="3.89341852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.62655075" y3="-0.61929498" z3="3.95010137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.5493921" y3="0.65709212" z3="3.27112885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82124044" y3="-0.6543083" z3="0.99233739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42172385" y3="-1.99064892" z3="0.86665349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77024583" y3="-2.63543669" z3="1.91092949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5342396" y3="-1.93024588" z3="3.08720539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98241284" y3="-0.62525967" z3="3.26903244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.63423723" y3="0.00570013" z3="2.214161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54898982" y3="-2.4997597" z3="-0.0899574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39558876" y3="-3.65340209" z3="1.79722703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67342547" y3="-2.53343061" z3="4.10982177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.77780868" y3="-0.1057761" z3="4.20583358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.95580104" y3="1.04543283" z3="2.31918445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.76723018" y3="0.50415677" z3="-4.28531475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.75208979" y3="-0.46073685" z3="-4.44495665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4185946" y3="-1.65202696" z3="-5.0781992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14191423" y3="-1.88662057" z3="-5.57925927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83657186" y3="-0.91954078" z3="-5.39505233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99895573" y3="1.42764483" z3="-3.74832351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7626178" y3="-0.31207089" z3="-4.06588264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43599068" y3="-2.69736226" z3="-5.20449603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07674465" y3="-2.8263322" z3="-6.08664082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85587476" y3="-1.10316115" z3="-5.74989375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.31549519" y3="-1.83210544" z3="5.03617647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32566469" y3="-3.6856922" z3="3.95546046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22734716" y3="-3.59914591" z3="-5.98780943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42815939" y3="-2.60900692" z3="-4.50865517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08618278" y3="1.15386305" z3="-1.50279757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1349436" y3="1.54599082" z3="-2.48928891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46173743" y3="1.45390649" z3="-1.70211038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8873321" y3="2.09297014" z3="-2.84080096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.18045667" y3="1.15438809" z3="-0.93297249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94883157" y3="2.31289167" z3="-2.98606275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.6111761" y3="2.18639733" z3="-3.66719184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94885871" y3="2.45174859" z3="-3.83804982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89736302" y3="2.45835511" z3="-4.44827286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.29214348" y3="2.93791935" z3="-4.75552454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.45806858" y3="3.17544748" z3="-3.3995064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.35485485" y3="3.58798696" z3="-4.20386153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2811059" y3="4.18627059" z3="-2.82687685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.05765289" y3="5.51731063" z3="-3.08716425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.10070007" y3="3.89878465" z3="-2.16639747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.70718242" y3="6.27217776" z3="-2.63561194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.15770266" y3="4.97179627" z3="-4.46618116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.99358986" y3="5.91927591" z3="-3.92894248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.31581671" y3="5.26929379" z3="-5.09902051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.83083386" y3="6.98107195" z3="-4.13531763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48684025" y3="-2.24667922" z3="-0.28593148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4437893" y3="-3.02694005" z3="-1.06446004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01844225" y3="-2.64690454" z3="0.5922783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10559733" y3="-1.42601536" z3="-0.69599182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18502865" y3="-1.44340284" z3="-1.10936293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3310457" y3="-0.40078127" z3="-1.4476685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10921161" y3="-1.55766259" z3="-0.89633384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41044167" y3="-2.09149175" z3="-1.96936273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3322,.0907,-.1936;7.3795,.1745,.4167;6.6464,.4547,-.3458;4.7456,1.2592,-2.2799;4.3887,.4806,-1.1907;2.7473,.8745,-3.6819;3.6636,1.7729,-3.1678;1.4335,2.619,-4.6816;1.5905,1.2816,-4.41;.5627,2.9556,-5.253;2.9213,-.4544,-3.4364;3.0917,.1147,-1.005;2.3846,-1.0367,-1.9882;.9141,-.8888,-1.8221;3.0757,-2.3646,-1.8124;-.1555,-3.6447,.6942;-.0129,-5.1783,-4.7505;-.2431,-4.945,-3.7075;-.8469,-4.3156,-1.0751;.775,-4.5258,-2.8529;-1.5548,-5.075,-3.2468;-1.8577,-4.7556,-1.9254;.4854,-4.2252,-1.5204;1.8033,-4.4119,-3.2028;-2.3488,-5.3949,-3.9254;-2.8922,-4.8249,-1.5779;-1.0413,-3.8911,.2527;-2.1839,-3.6868,.8969;-3.069,-4.1514,.46;-2.1786,-3.5632,2.3652;-2.233,-3.3983,5.1645;-3.3696,-3.792,3.0695;-1.0146,-3.2575,3.0865;-1.039,-3.1751,4.4757;-3.3957,-3.7122,4.4592;-4.282,-4.0426,2.5215;-.0586,-3.1034,2.5807;-.1118,-2.9551,5.0128;-4.3294,-3.9026,4.9953;-2.2518,-3.3422,6.2565;1.3959,-3.8492,-.6131;2.1521,-3.3317,-1.0597;.5403,.2801,-4.7331;-3.0951,-1.7618,.0508;-2.9369,-1.0215,1.2222;-1.8852,-.3639,1.5729;-.4178,.5243,1.2741;-.5318,1.4641,-.3273;.9473,-.725,1.3934;-.3877,1.6731,2.7531;-3.9193,-1.0319,2.1116;-3.7087,-.4286,3.3785;-.2699,.803,-1.172;.2105,2.2828,-.3034;-1.5297,1.9153,-.4746;.9999,-1.1095,2.4255;1.9128,-.2493,1.1458;.8146,-1.5553,.68;-.4243,1.103,3.6985;.5455,2.2653,2.754;-1.2344,2.3825,2.7404;-2.8457,-.8805,3.8934;-4.6266,-.6193,3.9501;-3.5494,.6571,3.2711;4.8212,-.6543,.9923;4.4217,-1.9906,.8667;3.7702,-2.6354,1.9109;3.5342,-1.9302,3.0872;3.9824,-.6253,3.269;4.6342,.0057,2.2142;4.549,-2.4998,-.09;3.3956,-3.6534,1.7972;2.6734,-2.5334,4.1098;3.7778,-.1058,4.2058;4.9558,1.0454,2.3192;-.7672,.5042,-4.2853;-1.7521,-.4607,-4.445;-1.4186,-1.652,-5.0782;-.1419,-1.8866,-5.5793;.8366,-.9195,-5.3951;-.999,1.4276,-3.7483;-2.7626,-.3121,-4.0659;-2.436,-2.6974,-5.2045;.0767,-2.8263,-6.0866;1.8559,-1.1032,-5.7499;2.3155,-1.8321,5.0362;2.3257,-3.6857,3.9555;-2.2273,-3.5991,-5.9878;-3.4282,-2.609,-4.5087;7.0862,1.1539,-1.5028;6.1349,1.546,-2.4893;8.4617,1.4539,-1.7021;8.8873,2.093,-2.8408;9.1805,1.1544,-.933;9.9488,2.3129,-2.9861;6.6112,2.1864,-3.6672;7.9489,2.4517,-3.838;5.8974,2.4584,-4.4483;8.2921,2.9379,-4.7555;3.4581,3.1754,-3.3995;2.3549,3.588,-4.2039;4.2811,4.1863,-2.8269;4.0577,5.5173,-3.0872;5.1007,3.8988,-2.1664;4.7072,6.2722,-2.6356;2.1577,4.9718,-4.4662;2.9936,5.9193,-3.9289;1.3158,5.2693,-5.099;2.8308,6.9811,-4.1353;-4.4868,-2.2467,-.2859;-4.4438,-3.0269,-1.0645;-5.0184,-2.6469,.5923;-5.1056,-1.426,-.696;-2.185,-1.4434,-1.1094;-2.331,-.4008,-1.4477;-1.1092,-1.5577,-.8963;-2.4104,-2.0915,-1.9694;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650347166282</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002604527265 0.000458361410 0.023407809667 0.005337132186</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030495995 -0.001208210 0.000148768 0.000238345 0.000278268 0.000376976 0.000388411 0.000450870 0.000603366 0.000711969 0.000910083 0.001075487 0.001169248 0.001225542 0.001304605 0.001365206 0.001536015 0.001723342 0.001749105 0.001886224 0.001993753 0.002343074 0.002419120 0.002586710 0.002719376 0.003057021 0.003151831 0.003319013 0.003752520 0.003796501 0.004165146 0.004587696 0.004835306 0.004889696 0.005734117 0.005890581 0.005980083 0.006300504 0.006650376 0.007415219 0.007797929 0.007954063 0.008805039 0.009200358 0.009661763 0.010403248 0.010886609 0.011349320 0.011658223 0.011954349 0.012671708 0.013051653 0.013793588 0.013964743 0.014664847 0.015154551 0.015438524 0.015521523 0.015869337 0.016579292 0.017196205 0.017306660 0.018624647 0.018743728 0.019350154 0.020337719 0.021123877 0.021160784 0.022258410 0.023027422 0.024740235 0.025646123 0.026212753 0.026492577 0.026860054 0.028652967 0.029141110 0.030912331 0.031805466 0.032135277 0.033210355 0.033914810 0.035487624 0.036020156 0.038072113 0.038808720 0.040004937 0.040318243 0.041280627 0.044174904 0.044856377 0.045058261 0.046797764 0.049097321 0.050003738 0.050544451 0.050781214 0.051139625 0.052415253 0.052460056 0.052753583 0.052838859 0.054122687 0.054553004 0.055228134 0.055804281 0.056382035 0.056460492 0.056892346 0.058151978 0.059728658 0.060435747 0.061295077 0.061601958 0.062620291 0.063132033 0.064780541 0.065015510 0.066163989 0.067382521 0.068161929 0.069287778 0.072415470 0.072815863 0.073967407 0.075790030 0.077311784 0.083206722 0.084562657 0.086366557 0.086798145 0.087373971 0.089965693 0.090275982 0.092755171 0.094526976 0.094713884 0.096170065 0.096843261 0.097547996 0.098442926 0.099354838 0.100018231 0.101640092 0.101947567 0.102664441 0.103100133 0.103811252 0.103900053 0.106230657 0.106671520 0.107011598 0.108805837 0.109819036 0.110623049 0.112024198 0.112643961 0.114412353 0.115984438 0.118636001 0.120171991 0.120973094 0.121734464 0.123402613 0.125032708 0.126099692 0.126767609 0.131362368 0.134641972 0.135376890 0.142294932 0.143149188 0.146617693 0.146971013 0.149430235 0.151359642 0.154076664 0.155497632 0.156441356 0.160073465 0.161438486 0.173056551 0.173608036 0.178142414 0.183713613 0.184603735 0.188839628 0.189768520 0.192934302 0.193658456 0.197801277 0.199620111 0.204339851 0.206661434 0.206787334 0.209647007 0.210854523 0.214218995 0.216371472 0.217160785 0.219805311 0.224626326 0.225927603 0.231506789 0.234589940 0.234940088 0.235468365 0.244287619 0.255433689 0.256827750 0.262421498 0.267268774 0.278829448 0.282751144 0.286115280 0.289837036 0.294824648 0.304002917 0.305415842 0.306637501 0.309328692 0.315286494 0.316171546 0.321823938 0.327796626 0.330853024 0.349434232 0.351146922 0.353463259 0.355088442 0.359490947 0.361833377 0.362273081 0.379321627 0.383828811 0.390988521 0.410015344 0.424920592 0.429249457 0.450769728 0.467415877 0.470188665 0.475771016 0.481823274 0.485268027 0.489469977 0.506843431 0.513229293 0.534447179 0.565771759 0.572451776 0.590559971 0.592838336 0.604993741 0.606112483 0.641608474 0.645130544 0.646554800 0.673703946 0.675795437 0.684390926 0.691287339 0.692083748 0.699014941 0.703940935 0.715474747 0.740713307 0.751064685 0.756918782 0.762808956 0.772111517 0.778563902 0.810108564 0.810878581 0.813221512 0.820749923 0.821376427 0.825603174 0.831005274 0.834676072 0.835672348 0.844738778 0.845170360 0.847272811 0.857765724 0.864309917 0.864770780 0.872764157 0.879915774 0.883768896 0.889021359 0.891714236 0.900260706 0.902549716 0.920033437 0.923092515 0.932164427 0.934532669 0.964394258 0.975564418 0.985143153 1.000486182 1.015752694 1.025991692 1.040772401 1.048953451 1.056412945 1.065982836 1.086043820 1.088124234 1.103142565 1.105512675 1.112121424 1.117239331 1.123195494 1.135032237 1.140014800 1.170667465 1.173672221 1.179989444 1.185249315 1.188112617 1.194313205 1.220688168 1.224509061 1.271423209 1.298989207 1.317199045 1.327436001 1.331063666 1.332828769 1.334840532 1.335435175 1.342280394 1.344788225 1.358141255 1.375046735 1.382338442 1.383421241 1.392255103 1.419334242 1.423504353 1.551245382 1.660541993 1.773190653</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">129</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33045718" y3="0.09642902" z3="-0.19292969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37758929" y3="0.17893743" z3="0.4187517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64515085" y3="0.45878078" z3="-0.34468645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74658833" y3="1.2621042" z3="-2.28150085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38782074" y3="0.48568062" z3="-1.1912353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74939469" y3="0.87654394" z3="-3.6854853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66636029" y3="1.77485901" z3="-3.17198665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.43960859" y3="2.62172514" z3="-4.690947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5946398" y3="1.28424199" z3="-4.41640208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.56976399" y3="2.95869834" z3="-5.26328619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91992699" y3="-0.45160187" z3="-3.43639474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.090269" y3="0.12116245" z3="-1.00556166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38274116" y3="-1.03119618" z3="-1.98740417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91231097" y3="-0.88267619" z3="-1.82170232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07289658" y3="-2.35946049" z3="-1.80985546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15757584" y3="-3.64771645" z3="0.69656273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01189211" y3="-5.17064435" z3="-4.75084229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24347415" y3="-4.93796941" z3="-3.70800931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8492092" y3="-4.31333902" z3="-1.07495031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77371843" y3="-4.51806982" z3="-2.8527219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55491683" y3="-5.07131929" z3="-3.24766354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85864464" y3="-4.75483899" z3="-1.92584554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48300505" y3="-4.2195585" z3="-1.51994801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80313106" y3="-4.40441467" z3="-3.2020041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34693169" y3="-5.3936496" z3="-3.92657105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89108189" y3="-4.83109786" z3="-1.57842698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04357474" y3="-3.89284248" z3="0.25404834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.18615039" y3="-3.68996366" z3="0.8986072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07136142" y3="-4.15379428" z3="0.46085435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.18034747" y3="-3.56863142" z3="2.36705049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23365103" y3="-3.40806176" z3="5.16644823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37113716" y3="-3.79912424" z3="3.07137396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01630689" y3="-3.26303327" z3="3.08828992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0401953" y3="-3.18268456" z3="4.47756251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39663395" y3="-3.7216206" z3="4.46117058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28395478" y3="-4.04890119" z3="2.52321491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06116846" y3="-3.1063755" z3="2.58225967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11341923" y3="-2.96154937" z3="5.01442697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33029358" y3="-3.91310511" z3="4.99733726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25212368" y3="-3.35349865" z3="6.25850136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39432805" y3="-3.8448371" z3="-0.61152869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.14957457" y3="-3.32568859" z3="-1.05720404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.54353288" y3="0.28537906" z3="-4.73610025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09697913" y3="-1.76386365" z3="0.05420916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94067326" y3="-1.02631092" z3="1.22740595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.88967426" y3="-0.36849487" z3="1.58062195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.4221742" y3="0.51820134" z3="1.28084864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.53842764" y3="1.46573867" z3="-0.31635162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94345194" y3="-0.729337" z3="1.3922154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38685207" y3="1.66198277" z3="2.76418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.92379219" y3="-1.03948969" z3="2.11597102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.71561784" y3="-0.43711689" z3="3.38356484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.27215514" y3="0.80961634" z3="-1.1624605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.20481508" y3="2.2854889" z3="-0.28787364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.53651438" y3="1.91300904" z3="-0.46459507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99935531" y3="-1.1145383" z3="2.42321726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.90446326" y3="-0.24879395" z3="1.14347918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81547706" y3="-1.5573976" z3="0.6780501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41930944" y3="1.08904425" z3="3.70785463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54550764" y3="2.25536924" z3="2.76344575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23439864" y3="2.37001062" z3="2.75703153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.85250151" y3="-0.88675194" z3="3.89920339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.63351335" y3="-0.63042994" z3="3.95449606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.55899073" y3="0.64848533" z3="3.27681364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.81872313" y3="-0.64787605" z3="0.9931151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42174165" y3="-1.98517092" z3="0.86816473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77104976" y3="-2.63039067" z3="1.91273747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53286457" y3="-1.92449251" z3="3.0882745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97782755" y3="-0.61816232" z3="3.26908405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62928978" y3="0.01310462" z3="2.21417377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55058304" y3="-2.49488746" z3="-0.08797247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39828046" y3="-3.64923882" z3="1.79952762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67277331" y3="-2.5285536" z3="4.11102172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.77119903" y3="-0.0980353" z3="4.20510578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.94895688" y3="1.05364289" z3="2.31861417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.76460792" y3="0.50851031" z3="-4.28453212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7499501" y3="-0.45806342" z3="-4.44511664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41786043" y3="-1.64923774" z3="-5.07983163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14112492" y3="-1.88210814" z3="-5.58290457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83824133" y3="-0.91354383" z3="-5.39783345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99593675" y3="1.43195224" z3="-3.74770939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.76141645" y3="-0.31173089" z3="-4.06300881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43575808" y3="-2.69527733" z3="-5.20458462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07698885" y3="-2.82180371" z3="-6.08999736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85064157" y3="-1.10479352" z3="-5.75004509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30957039" y3="-1.82603163" z3="5.03433058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33070305" y3="-3.68286023" z3="3.95960667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22798585" y3="-3.59674422" z3="-5.9882469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42711883" y3="-2.60744864" z3="-4.50746691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08641567" y3="1.15504533" z3="-1.50258217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13651582" y3="1.54669695" z3="-2.4904117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46223852" y3="1.4517113" z3="-1.70183668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8893852" y3="2.08707846" z3="-2.84182651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17967887" y3="1.15224621" z3="-0.93160583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9510844" y3="2.30384016" z3="-2.9872189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61458421" y3="2.18437354" z3="-3.66932084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.95253277" y3="2.44646002" z3="-3.84018867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90203252" y3="2.45725929" z3="-4.45100776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.29721263" y3="2.93056538" z3="-4.75843362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.46383395" y3="3.1769675" z3="-3.40850225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3624175" y3="3.58989334" z3="-4.21511884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.28824716" y3="4.18765233" z3="-2.83807266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.06779449" y3="5.5185493" z3="-3.10278826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.10571318" y3="3.90067572" z3="-2.17480187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.71744979" y3="6.27431543" z3="-2.65153571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.16852114" y3="4.97316313" z3="-4.48230301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.00599983" y3="5.92029742" z3="-3.94747143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.32791568" y3="5.27044512" z3="-5.11697036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.84695639" y3="6.98116466" z3="-4.15872544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48813489" y3="-2.24875726" z3="-0.28497342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44451364" y3="-3.02734472" z3="-1.06550986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.02018501" y3="-2.65113018" z3="0.59225751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10701083" y3="-1.42730747" z3="-0.69325831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18563262" y3="-1.44238783" z3="-1.10399036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33338862" y3="-0.40029574" z3="-1.44160398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10984559" y3="-1.55542052" z3="-0.88986493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40909084" y3="-2.08954873" z3="-1.96547358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3305,.0964,-.1929;7.3776,.1789,.4188;6.6452,.4588,-.3447;4.7466,1.2621,-2.2815;4.3878,.4857,-1.1912;2.7494,.8765,-3.6855;3.6664,1.7749,-3.172;1.4396,2.6217,-4.6909;1.5946,1.2842,-4.4164;.5698,2.9587,-5.2633;2.9199,-.4516,-3.4364;3.0903,.1212,-1.0056;2.3827,-1.0312,-1.9874;.9123,-.8827,-1.8217;3.0729,-2.3595,-1.8099;-.1576,-3.6477,.6966;-.0119,-5.1706,-4.7508;-.2435,-4.938,-3.708;-.8492,-4.3133,-1.075;.7737,-4.5181,-2.8527;-1.5549,-5.0713,-3.2477;-1.8586,-4.7548,-1.9258;.483,-4.2196,-1.5199;1.8031,-4.4044,-3.202;-2.3469,-5.3936,-3.9266;-2.8911,-4.8311,-1.5784;-1.0436,-3.8928,.254;-2.1862,-3.69,.8986;-3.0714,-4.1538,.4609;-2.1803,-3.5686,2.3671;-2.2337,-3.4081,5.1664;-3.3711,-3.7991,3.0714;-1.0163,-3.263,3.0883;-1.0402,-3.1827,4.4776;-3.3966,-3.7216,4.4612;-4.284,-4.0489,2.5232;-.0612,-3.1064,2.5823;-.1134,-2.9615,5.0144;-4.3303,-3.9131,4.9973;-2.2521,-3.3535,6.2585;1.3943,-3.8448,-.6115;2.1496,-3.3257,-1.0572;.5435,.2854,-4.7361;-3.097,-1.7639,.0542;-2.9407,-1.0263,1.2274;-1.8897,-.3685,1.5806;-.4222,.5182,1.2808;-.5384,1.4657,-.3164;.9435,-.7293,1.3922;-.3869,1.662,2.7642;-3.9238,-1.0395,2.116;-3.7156,-.4371,3.3836;-.2722,.8096,-1.1625;.2048,2.2855,-.2879;-1.5365,1.913,-.4646;.9994,-1.1145,2.4232;1.9045,-.2488,1.1435;.8155,-1.5574,.6781;-.4193,1.089,3.7079;.5455,2.2554,2.7634;-1.2344,2.37,2.757;-2.8525,-.8868,3.8992;-4.6335,-.6304,3.9545;-3.559,.6485,3.2768;4.8187,-.6479,.9931;4.4217,-1.9852,.8682;3.771,-2.6304,1.9127;3.5329,-1.9245,3.0883;3.9778,-.6182,3.2691;4.6293,.0131,2.2142;4.5506,-2.4949,-.088;3.3983,-3.6492,1.7995;2.6728,-2.5286,4.111;3.7712,-.098,4.2051;4.949,1.0536,2.3186;-.7646,.5085,-4.2845;-1.75,-.4581,-4.4451;-1.4179,-1.6492,-5.0798;-.1411,-1.8821,-5.5829;.8382,-.9135,-5.3978;-.9959,1.432,-3.7477;-2.7614,-.3117,-4.063;-2.4358,-2.6953,-5.2046;.077,-2.8218,-6.09;1.8506,-1.1048,-5.75;2.3096,-1.826,5.0343;2.3307,-3.6829,3.9596;-2.228,-3.5967,-5.9882;-3.4271,-2.6074,-4.5075;7.0864,1.155,-1.5026;6.1365,1.5467,-2.4904;8.4622,1.4517,-1.7018;8.8894,2.0871,-2.8418;9.1797,1.1522,-.9316;9.9511,2.3038,-2.9872;6.6146,2.1844,-3.6693;7.9525,2.4465,-3.8402;5.902,2.4573,-4.451;8.2972,2.9306,-4.7584;3.4638,3.177,-3.4085;2.3624,3.5899,-4.2151;4.2882,4.1877,-2.8381;4.0678,5.5185,-3.1028;5.1057,3.9007,-2.1748;4.7174,6.2743,-2.6515;2.1685,4.9732,-4.4823;3.006,5.9203,-3.9475;1.3279,5.2704,-5.117;2.847,6.9812,-4.1587;-4.4881,-2.2488,-.285;-4.4445,-3.0273,-1.0655;-5.0202,-2.6511,.5923;-5.107,-1.4273,-.6933;-2.1856,-1.4424,-1.104;-2.3334,-.4003,-1.4416;-1.1098,-1.5554,-.8899;-2.4091,-2.0895,-1.9655;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650335196682</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002130079720 0.000427242000 0.021509656650 0.005358998683</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030496560 -0.001016032 0.000148658 0.000237235 0.000277828 0.000377240 0.000391537 0.000451191 0.000604378 0.000712676 0.000910119 0.001075429 0.001169229 0.001225590 0.001305713 0.001365294 0.001536000 0.001724410 0.001749256 0.001887246 0.001994535 0.002343253 0.002420815 0.002587562 0.002725146 0.003058094 0.003158921 0.003319357 0.003755019 0.003800831 0.004170320 0.004589563 0.004841508 0.004897025 0.005743857 0.005896702 0.005992514 0.006300927 0.006651062 0.007419067 0.007811264 0.007957928 0.008807068 0.009200979 0.009669661 0.010404262 0.010908188 0.011363550 0.011667097 0.011967216 0.012671804 0.013053392 0.013796293 0.013964881 0.014665247 0.015158941 0.015439303 0.015521559 0.015870445 0.016580102 0.017199805 0.017310823 0.018629071 0.018743845 0.019375817 0.020340504 0.021124303 0.021160582 0.022260795 0.023028867 0.024749958 0.025649261 0.026218290 0.026494521 0.026891157 0.028653980 0.029151037 0.030916022 0.031835526 0.032173196 0.033248324 0.033932262 0.035489461 0.036027370 0.038078315 0.038844682 0.040015081 0.040319766 0.041290630 0.044184664 0.044889704 0.045059281 0.046798131 0.049097348 0.050007607 0.050547144 0.050783798 0.051139936 0.052415829 0.052460082 0.052755505 0.052838802 0.054122757 0.054554957 0.055229247 0.055806818 0.056382155 0.056460730 0.056894170 0.058155751 0.059729515 0.060436810 0.061295769 0.061603457 0.062634139 0.063142816 0.064792705 0.065015872 0.066166896 0.067383588 0.068176667 0.069399363 0.072416642 0.073060123 0.073970321 0.075813345 0.077311899 0.083214384 0.084562849 0.086368934 0.086798262 0.087377702 0.089965737 0.090304873 0.092755474 0.094529919 0.094785721 0.096175354 0.096843490 0.097550173 0.098468145 0.099358299 0.100023818 0.101696515 0.101955345 0.102664764 0.103101186 0.103811593 0.103900123 0.106266002 0.106671543 0.107031807 0.108806668 0.109834279 0.110761764 0.112025900 0.112664450 0.114419073 0.115984960 0.118652818 0.120195376 0.121004198 0.121751151 0.123405791 0.125044608 0.126100138 0.126768026 0.131366245 0.134642123 0.135378595 0.142296974 0.143153290 0.146621791 0.146972515 0.149430227 0.151367283 0.154101029 0.155532081 0.156458790 0.160081593 0.161442923 0.173059776 0.173607919 0.178144391 0.183716399 0.184604096 0.188840117 0.189769234 0.192934514 0.193662034 0.197805199 0.199620318 0.204365811 0.206667832 0.206790134 0.209647105 0.210873326 0.214272613 0.216403017 0.217171407 0.219840961 0.224629140 0.225937454 0.231512062 0.234591421 0.234952372 0.235469817 0.244290940 0.255457148 0.256829798 0.262426508 0.267371296 0.278848842 0.282752203 0.286115915 0.289876448 0.294864188 0.304003412 0.305415931 0.306674155 0.309765667 0.315288133 0.316198833 0.321824057 0.327861118 0.330872866 0.349438134 0.351179394 0.353463086 0.355088768 0.359513801 0.361852562 0.362274034 0.379370303 0.383901668 0.390988739 0.410017488 0.424925096 0.429249684 0.450806464 0.467521482 0.470290961 0.475771069 0.481844471 0.485384218 0.489491349 0.507014556 0.513255253 0.534485772 0.565772195 0.572456030 0.590561864 0.592845563 0.605111648 0.606128446 0.641613893 0.645176280 0.646555400 0.673714333 0.675856535 0.684391461 0.691287788 0.692100074 0.699015650 0.703941113 0.715550537 0.740751955 0.751064694 0.757158168 0.762831238 0.772121248 0.778564012 0.810110737 0.811111621 0.813265000 0.820752364 0.821380186 0.825663339 0.831006022 0.834708772 0.835674439 0.844746080 0.845173859 0.847317547 0.857767058 0.864317842 0.864771245 0.872768040 0.879975221 0.883788024 0.889022471 0.891714454 0.900267723 0.902663825 0.920036715 0.923093409 0.932194782 0.934532963 0.964394366 0.975565203 0.985143247 1.000488548 1.015790974 1.026012491 1.040796358 1.048967428 1.056490331 1.066155486 1.086044594 1.088136354 1.103143405 1.105514839 1.112124214 1.117588332 1.123195817 1.135033529 1.140058729 1.170669741 1.173672780 1.180003318 1.185267193 1.188115044 1.194313456 1.221048033 1.224518556 1.271425779 1.299067027 1.317280817 1.327458941 1.331102690 1.332831001 1.335159235 1.335596336 1.342280425 1.344788321 1.358145068 1.375046778 1.382346069 1.383432392 1.392402703 1.419339513 1.423580078 1.551247552 1.660542104 1.773213782</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">130</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.32834356" y3="0.10134756" z3="-0.19249998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37519451" y3="0.18084145" z3="0.41978832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6436739" y3="0.46070798" z3="-0.34446507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74761345" y3="1.26407435" z3="-2.28370246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38699046" y3="0.49102102" z3="-1.19171606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.75051236" y3="0.87870909" z3="-3.68723725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66886506" y3="1.77667612" z3="-3.17609824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.44450289" y3="2.62246138" z3="-4.69913853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59642419" y3="1.28615037" z3="-4.41927233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.57565072" y3="2.95932527" z3="-5.27319741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91953021" y3="-0.44939191" z3="-3.43521539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.08879594" y3="0.12963357" z3="-1.00586416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38061977" y3="-1.02449629" z3="-1.98508304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9101654" y3="-0.87425247" z3="-1.82079184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0701849" y3="-2.35255199" z3="-1.80374589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.158426" y3="-3.64914073" z3="0.69832952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00986203" y3="-5.16135258" z3="-4.75206472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24126934" y3="-4.93195813" z3="-3.70838301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84802878" y3="-4.31341122" z3="-1.07414225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77541461" y3="-4.51257885" z3="-2.85196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55270838" y3="-5.06779941" z3="-3.24865823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85707161" y3="-4.75418523" z3="-1.92623333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48421926" y3="-4.21711953" z3="-1.51854743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80350122" y3="-4.39441615" z3="-3.20078041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34550399" y3="-5.38783405" z3="-3.9288424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8910425" y3="-4.82916828" z3="-1.57908532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04381033" y3="-3.89449741" z3="0.25516691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.18686688" y3="-3.6927763" z3="0.89933259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.07167998" y3="-4.15628545" z3="0.46059051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.18202901" y3="-3.5735287" z3="2.36797702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.236561" y3="-3.41759978" z3="5.16763421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3725765" y3="-3.80677115" z3="3.07159815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01875012" y3="-3.26773376" z3="3.090124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04316144" y3="-3.18965697" z3="4.47949405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39861553" y3="-3.73163811" z3="4.46152055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28440945" y3="-4.05747285" z3="2.52295289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06311499" y3="-3.11003581" z3="2.58470865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1162104" y3="-2.96901535" z3="5.01690025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33186179" y3="-3.92567035" z3="4.99714234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2553489" y3="-3.36522916" z3="6.25980063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39341363" y3="-3.84122854" z3="-0.6094169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.14797886" y3="-3.31979875" z3="-1.05382262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.54403938" y3="0.28567901" z3="-4.73822812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09815618" y3="-1.76550058" z3="0.05763232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94322795" y3="-1.02926322" z3="1.23190614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.89351027" y3="-0.37081602" z3="1.58737893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.42470951" y3="0.51538822" z3="1.28737988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.54421151" y3="1.46615417" z3="-0.30713746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94001549" y3="-0.73497758" z3="1.39080901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3855792" y3="1.6524395" z3="2.77502086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.92745671" y3="-1.04456039" z3="2.11916582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.71998028" y3="-0.44519143" z3="3.38882983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.27984733" y3="0.81233901" z3="-1.15675879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.19438443" y3="2.28776701" z3="-0.27760344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.54412248" y3="1.91430059" z3="-0.45073442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99657723" y3="-1.12639484" z3="2.41997425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.90484483" y3="-0.25720402" z3="1.14331023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80504337" y3="-1.56056224" z3="0.67197121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41499232" y3="1.07439454" z3="3.71583918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54753762" y3="2.24523007" z3="2.77438711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23303505" y3="2.3612499" z3="2.77397547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.85582599" y3="-0.89624529" z3="3.90292663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.63790626" y3="-0.64075002" z3="3.95908283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.56401407" y3="0.64119544" z3="3.28538615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.81554857" y3="-0.64136169" z3="0.99411202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42210455" y3="-1.97973946" z3="0.87105207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77187629" y3="-2.62495231" z3="1.91586809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53052953" y3="-1.91791501" z3="3.08988237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97178457" y3="-0.6101342" z3="3.26894911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62288517" y3="0.02108507" z3="2.21377853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5535025" y3="-2.49065567" z3="-0.08391244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.40201238" y3="-3.64486995" z3="1.80409266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67026738" y3="-2.52255991" z3="4.11213289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.76280677" y3="-0.0890933" z3="4.20391925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.93999272" y3="1.06244963" z3="2.31698146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.76185302" y3="0.51048201" z3="-4.28553423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.74816371" y3="-0.45350776" z3="-4.44189704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41775639" y3="-1.64470133" z3="-5.07826583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14274893" y3="-1.87992745" z3="-5.58208816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83734237" y3="-0.91398834" z3="-5.40132548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.9907684" y3="1.4338985" z3="-3.74709013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.75773587" y3="-0.30485899" z3="-4.05979219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43689719" y3="-2.68945504" z3="-5.20257496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0735153" y3="-2.81959122" z3="-6.09120797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85418086" y3="-1.09987507" z3="-5.75762168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30355233" y3="-1.81926398" z3="5.03356262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.33134714" y3="-3.67818798" z3="3.96194785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23181989" y3="-3.59065706" z3="-5.98745623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42651577" y3="-2.60034784" z3="-4.50391456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08676226" y3="1.15441277" z3="-1.50330625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13804056" y3="1.54555286" z3="-2.49251312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46339313" y3="1.44997111" z3="-1.70178062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.89237152" y3="2.08336117" z3="-2.84237685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.18000769" y3="1.15122399" z3="-0.93043129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.95471564" y3="2.30024252" z3="-2.98685247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61783407" y3="2.17992557" z3="-3.67238129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.95644431" y3="2.44107355" z3="-3.84235972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90608587" y3="2.45183915" z3="-4.455236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.30239332" y3="2.92271435" z3="-4.761262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.46889677" y3="3.17862601" z3="-3.41680656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.36895974" y3="3.59062596" z3="-4.22599544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.29456252" y3="4.18987084" z3="-2.84885572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.07736104" y3="5.5200892" z3="-3.11867645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.11145775" y3="3.90314453" z3="-2.18468991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.72863246" y3="6.27545994" z3="-2.67020421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.17838506" y3="4.9733299" z3="-4.49836721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.01713484" y3="5.92089669" z3="-3.96584181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.33912166" y3="5.27017541" z3="-5.13503543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.85961283" y3="6.98189955" z3="-4.1802351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48886723" y3="-2.25108841" z3="-0.28305443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44368887" y3="-3.0272528" z3="-1.06566897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.02063221" y3="-2.65677681" z3="0.59275444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10879283" y3="-1.42948454" z3="-0.68936638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18661453" y3="-1.44212642" z3="-1.10018252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33554677" y3="-0.39970468" z3="-1.43695967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11073978" y3="-1.55328081" z3="-0.88562165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40816992" y3="-2.08935048" z3="-1.96194058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3283,.1013,-.1925;7.3752,.1808,.4198;6.6437,.4607,-.3445;4.7476,1.2641,-2.2837;4.387,.491,-1.1917;2.7505,.8787,-3.6872;3.6689,1.7767,-3.1761;1.4445,2.6225,-4.6991;1.5964,1.2862,-4.4193;.5757,2.9593,-5.2732;2.9195,-.4494,-3.4352;3.0888,.1296,-1.0059;2.3806,-1.0245,-1.9851;.9102,-.8743,-1.8208;3.0702,-2.3526,-1.8037;-.1584,-3.6491,.6983;-.0099,-5.1614,-4.7521;-.2413,-4.932,-3.7084;-.848,-4.3134,-1.0741;.7754,-4.5126,-2.852;-1.5527,-5.0678,-3.2487;-1.8571,-4.7542,-1.9262;.4842,-4.2171,-1.5185;1.8035,-4.3944,-3.2008;-2.3455,-5.3878,-3.9288;-2.891,-4.8292,-1.5791;-1.0438,-3.8945,.2552;-2.1869,-3.6928,.8993;-3.0717,-4.1563,.4606;-2.182,-3.5735,2.368;-2.2366,-3.4176,5.1676;-3.3726,-3.8068,3.0716;-1.0188,-3.2677,3.0901;-1.0432,-3.1897,4.4795;-3.3986,-3.7316,4.4615;-4.2844,-4.0575,2.523;-.0631,-3.11,2.5847;-.1162,-2.969,5.0169;-4.3319,-3.9257,4.9971;-2.2553,-3.3652,6.2598;1.3934,-3.8412,-.6094;2.148,-3.3198,-1.0538;.544,.2857,-4.7382;-3.0982,-1.7655,.0576;-2.9432,-1.0293,1.2319;-1.8935,-.3708,1.5874;-.4247,.5154,1.2874;-.5442,1.4662,-.3071;.94,-.735,1.3908;-.3856,1.6524,2.775;-3.9275,-1.0446,2.1192;-3.72,-.4452,3.3888;-.2798,.8123,-1.1568;.1944,2.2878,-.2776;-1.5441,1.9143,-.4507;.9966,-1.1264,2.42;1.9048,-.2572,1.1433;.805,-1.5606,.672;-.415,1.0744,3.7158;.5475,2.2452,2.7744;-1.233,2.3612,2.774;-2.8558,-.8962,3.9029;-4.6379,-.6408,3.9591;-3.564,.6412,3.2854;4.8155,-.6414,.9941;4.4221,-1.9797,.8711;3.7719,-2.625,1.9159;3.5305,-1.9179,3.0899;3.9718,-.6101,3.2689;4.6229,.0211,2.2138;4.5535,-2.4907,-.0839;3.402,-3.6449,1.8041;2.6703,-2.5226,4.1121;3.7628,-.0891,4.2039;4.94,1.0624,2.317;-.7619,.5105,-4.2855;-1.7482,-.4535,-4.4419;-1.4178,-1.6447,-5.0783;-.1427,-1.8799,-5.5821;.8373,-.914,-5.4013;-.9908,1.4339,-3.7471;-2.7577,-.3049,-4.0598;-2.4369,-2.6895,-5.2026;.0735,-2.8196,-6.0912;1.8542,-1.0999,-5.7576;2.3036,-1.8193,5.0336;2.3313,-3.6782,3.9619;-2.2318,-3.5907,-5.9875;-3.4265,-2.6003,-4.5039;7.0868,1.1544,-1.5033;6.138,1.5456,-2.4925;8.4634,1.45,-1.7018;8.8924,2.0834,-2.8424;9.18,1.1512,-.9304;9.9547,2.3002,-2.9869;6.6178,2.1799,-3.6724;7.9564,2.4411,-3.8424;5.9061,2.4518,-4.4552;8.3024,2.9227,-4.7613;3.4689,3.1786,-3.4168;2.369,3.5906,-4.226;4.2946,4.1899,-2.8489;4.0774,5.5201,-3.1187;5.1115,3.9031,-2.1847;4.7286,6.2755,-2.6702;2.1784,4.9733,-4.4984;3.0171,5.9209,-3.9658;1.3391,5.2702,-5.135;2.8596,6.9819,-4.1802;-4.4889,-2.2511,-.2831;-4.4437,-3.0273,-1.0657;-5.0206,-2.6568,.5928;-5.1088,-1.4295,-.6894;-2.1866,-1.4421,-1.1002;-2.3355,-.3997,-1.437;-1.1107,-1.5533,-.8856;-2.4082,-2.0894,-1.9619;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650321321897</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002251662882 0.000403576449 0.022011307985 0.005330595015</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030496433 -0.000808335 0.000152555 0.000234303 0.000277634 0.000377041 0.000387616 0.000449000 0.000603905 0.000714179 0.000910100 0.001075532 0.001170193 0.001225666 0.001307035 0.001365435 0.001535991 0.001724639 0.001749925 0.001888608 0.001994536 0.002343646 0.002421539 0.002587471 0.002729106 0.003059385 0.003162995 0.003319258 0.003755279 0.003807906 0.004169859 0.004589828 0.004852623 0.004897545 0.005750966 0.005900497 0.006001029 0.006300513 0.006653477 0.007421383 0.007822298 0.007965223 0.008806902 0.009201038 0.009672202 0.010404313 0.010918410 0.011372900 0.011682984 0.011976215 0.012672055 0.013055619 0.013797755 0.013964932 0.014667626 0.015161376 0.015440733 0.015521898 0.015871319 0.016580212 0.017199868 0.017316586 0.018634566 0.018744077 0.019393310 0.020344902 0.021124632 0.021160986 0.022262908 0.023029383 0.024755770 0.025650557 0.026222840 0.026494676 0.026920443 0.028655817 0.029153230 0.030924205 0.031855288 0.032185441 0.033279164 0.033946162 0.035492139 0.036032377 0.038082936 0.038868542 0.040033765 0.040322127 0.041297476 0.044201757 0.044941479 0.045062527 0.046798809 0.049097361 0.050015920 0.050551032 0.050783852 0.051140108 0.052416548 0.052460244 0.052756879 0.052839029 0.054123128 0.054555331 0.055230503 0.055806574 0.056382326 0.056460873 0.056894170 0.058158213 0.059732845 0.060439049 0.061296182 0.061604413 0.062639133 0.063146596 0.064796219 0.065015919 0.066171609 0.067384777 0.068182553 0.069457975 0.072416913 0.073217716 0.073974747 0.075829053 0.077312953 0.083215375 0.084562887 0.086369038 0.086798488 0.087377324 0.089965780 0.090322651 0.092755914 0.094531036 0.094827811 0.096180275 0.096845955 0.097551799 0.098488536 0.099361559 0.100028597 0.101747075 0.101969363 0.102667256 0.103103620 0.103811712 0.103900313 0.106303623 0.106671625 0.107047677 0.108806605 0.109838243 0.110867246 0.112027566 0.112686640 0.114424350 0.115985093 0.118665013 0.120206633 0.121023571 0.121757680 0.123409647 0.125054417 0.126100315 0.126768266 0.131368738 0.134642853 0.135378919 0.142297021 0.143156455 0.146627455 0.146973412 0.149431385 0.151367537 0.154128922 0.155530435 0.156464868 0.160087882 0.161445150 0.173061845 0.173607963 0.178144329 0.183717881 0.184605286 0.188843525 0.189773046 0.192934533 0.193663498 0.197807837 0.199620415 0.204399550 0.206680456 0.206796649 0.209647387 0.210879731 0.214324628 0.216415237 0.217183585 0.219876870 0.224629835 0.225952166 0.231522680 0.234592058 0.234969150 0.235473745 0.244293198 0.255473568 0.256830888 0.262429981 0.267508982 0.278864422 0.282754149 0.286116152 0.289937640 0.294895460 0.304013692 0.305415933 0.306694437 0.310096532 0.315289431 0.316217708 0.321824171 0.327936082 0.330873344 0.349438374 0.351209719 0.353466310 0.355089387 0.359526870 0.361863812 0.362274853 0.379450832 0.383982095 0.390990504 0.410017589 0.424929571 0.429252975 0.450843723 0.467610767 0.470369777 0.475771092 0.481861847 0.485459459 0.489506276 0.507117049 0.513273100 0.534510359 0.565772923 0.572456221 0.590582574 0.592846939 0.605245732 0.606173915 0.641614442 0.645230360 0.646555430 0.673732569 0.675905889 0.684391491 0.691288542 0.692121441 0.699016605 0.703941137 0.715630492 0.740780626 0.751065390 0.757241822 0.762830934 0.772124909 0.778564286 0.810115042 0.811320619 0.813328513 0.820753436 0.821383711 0.825696925 0.831008953 0.834751749 0.835674858 0.844772803 0.845179875 0.847364956 0.857767557 0.864318971 0.864771796 0.872768656 0.880004966 0.883801214 0.889027576 0.891714539 0.900268326 0.902736354 0.920041722 0.923093713 0.932212555 0.934535320 0.964395139 0.975567986 0.985143315 1.000489130 1.015807050 1.026042024 1.040812406 1.048989739 1.056556701 1.066280887 1.086045663 1.088148937 1.103144070 1.105514825 1.112124974 1.117760584 1.123195945 1.135035645 1.140085393 1.170669840 1.173673052 1.180015796 1.185269338 1.188117311 1.194313539 1.221296321 1.224532431 1.271447801 1.299121769 1.317343054 1.327475461 1.331141845 1.332831345 1.335234845 1.335860119 1.342281473 1.344788484 1.358146401 1.375046891 1.382349867 1.383458540 1.392738988 1.419339909 1.423750824 1.551248202 1.660545436 1.773273244</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">131</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33018336" y3="0.09627811" z3="-0.19282817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37725573" y3="0.17842034" z3="0.41865783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64488246" y3="0.45822623" z3="-0.34481223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74643773" y3="1.26171058" z3="-2.28163888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38769992" y3="0.48573015" z3="-1.19113369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74892592" y3="0.87634928" z3="-3.68482028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66612919" y3="1.77460627" z3="-3.17194854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.43887093" y3="2.62086476" z3="-4.69029825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59360097" y3="1.28379567" z3="-4.41497351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5689191" y3="2.95776413" z3="-5.2626266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92017604" y3="-0.4519712" z3="-3.43594425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09018557" y3="0.12168633" z3="-1.00542692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38280817" y3="-1.03110884" z3="-1.98683464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91230356" y3="-0.88263522" z3="-1.8214114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07334765" y3="-2.35904918" z3="-1.80864148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15686717" y3="-3.64693349" z3="0.69641069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01073156" y3="-5.16988025" z3="-4.7511936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24191174" y3="-4.9380143" z3="-3.70804297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84759397" y3="-4.31369225" z3="-1.07486733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77541635" y3="-4.51888558" z3="-2.85240211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55353136" y3="-5.07076705" z3="-3.24798417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85731387" y3="-4.75425368" z3="-1.92615464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48475441" y3="-4.22061843" z3="-1.51953203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80411113" y3="-4.40396601" z3="-3.20147232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34645763" y3="-5.39132293" z3="-3.92735926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89093661" y3="-4.82768932" z3="-1.57896556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.04256399" y3="-3.89244091" z3="0.25383058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.18537075" y3="-3.68968368" z3="0.89809418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.070363" y3="-4.15359294" z3="0.46009617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.18029878" y3="-3.56840697" z3="2.36655323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23490738" y3="-3.40830307" z3="5.16597799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37126279" y3="-3.7991417" z3="3.07037159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0166531" y3="-3.2629921" z3="3.08837039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04114551" y3="-3.18291402" z3="4.47764714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39738981" y3="-3.72185353" z3="4.46016781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28351714" y3="-4.04931073" z3="2.52190477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06093432" y3="-3.10698316" z3="2.5828309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11420202" y3="-2.96258193" z3="5.0149636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33106571" y3="-3.913727" z3="4.99592087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2537861" y3="-3.35414498" z3="6.25805409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39524468" y3="-3.84547221" z3="-0.61110477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.150374" y3="-3.32596686" z3="-1.05656444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.54234217" y3="0.28355181" z3="-4.73538842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09672561" y3="-1.76333323" z3="0.05415623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94014845" y3="-1.0253776" z3="1.22709665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.88933925" y3="-0.36738392" z3="1.58019692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.42118077" y3="0.51916587" z3="1.28043514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.5375596" y3="1.46506402" z3="-0.31734805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94376206" y3="-0.72994856" z3="1.39189861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38595595" y3="1.66247495" z3="2.76360796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.9233643" y3="-1.03837833" z3="2.11552832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.71442302" y3="-0.43673287" z3="3.38363781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.27359006" y3="0.80798951" z3="-1.16413887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.2040667" y3="2.28480297" z3="-0.290058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.53605696" y3="1.91424701" z3="-0.46369647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99861141" y3="-1.11706783" z3="2.42261391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.90768014" y3="-0.25205395" z3="1.14412632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8118905" y3="-1.55786529" z3="0.67630813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41853064" y3="1.08885991" z3="3.70693695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54703988" y3="2.25519309" z3="2.76313803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23314388" y3="2.37127409" z3="2.75679222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.8507364" y3="-0.88747926" z3="3.89828176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.63216243" y3="-0.63011785" z3="3.95482605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.55737005" y3="0.64916066" z3="3.2777878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.81843069" y3="-0.64772477" z3="0.99338606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42166837" y3="-1.98501472" z3="0.86873928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77088472" y3="-2.63012593" z3="1.91327016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53250284" y3="-1.9241793" z3="3.08861416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97746171" y3="-0.61788601" z3="3.26928587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62893003" y3="0.01330709" z3="2.21432809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55070313" y3="-2.49482824" z3="-0.08721647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39834425" y3="-3.64897655" z3="1.80030203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6720675" y3="-2.52817963" z3="4.11109078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.77085888" y3="-0.09774905" z3="4.2052846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.94854278" y3="1.05379967" z3="2.31867225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.76495258" y3="0.5076622" z3="-4.28485221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.75056387" y3="-0.45738938" z3="-4.44374794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41857738" y3="-1.64871679" z3="-5.0786066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14234857" y3="-1.88302528" z3="-5.58074568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83706527" y3="-0.91592533" z3="-5.39752389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99560324" y3="1.43117966" z3="-3.74754064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.76125753" y3="-0.30948863" z3="-4.06295402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4368487" y3="-2.69410872" z3="-5.20387375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07535025" y3="-2.82280046" z3="-6.08856784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85292106" y3="-1.10341336" z3="-5.75144749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30964168" y3="-1.82593026" z3="5.03493453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32888936" y3="-3.68215774" z3="3.95886979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22978831" y3="-3.59552179" z3="-5.98791759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42783593" y3="-2.60557687" z3="-4.50673184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08623342" y3="1.15446759" z3="-1.50278297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13629678" y3="1.54603712" z3="-2.49065254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46222313" y3="1.45195927" z3="-1.70179538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88944134" y3="2.08786132" z3="-2.84158062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17979797" y3="1.15271664" z3="-0.93155015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.95129825" y3="2.30582251" z3="-2.98661098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61429863" y3="2.18356911" z3="-3.66954063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.95236558" y3="2.44652256" z3="-3.84009981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90159813" y3="2.45602339" z3="-4.45132851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.29699051" y3="2.93051655" z3="-4.75829723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.46341144" y3="3.17680377" z3="-3.40829641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.36178851" y3="3.58929112" z3="-4.21487736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.28781012" y3="4.18774748" z3="-2.83806395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.06740174" y3="5.51844226" z3="-3.10301809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.10589427" y3="3.90066462" z3="-2.17555649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.71750608" y3="6.27384404" z3="-2.65256585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.16790001" y3="4.97249571" z3="-4.48224092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.0053062" y3="5.9199104" z3="-3.94748682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.32723239" y3="5.26967631" z3="-5.11687146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.84552801" y3="6.98110117" z3="-4.15822379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48796855" y3="-2.2485501" z3="-0.28449065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44413503" y3="-3.02682233" z3="-1.06514069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01957059" y3="-2.6514262" z3="0.59268929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10733434" y3="-1.42735278" z3="-0.69250347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18590452" y3="-1.44225937" z3="-1.10470699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33366186" y3="-0.39999055" z3="-1.44236927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11000445" y3="-1.55496214" z3="-0.89103904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40949431" y3="-2.08984624" z3="-1.96569886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3302,.0963,-.1928;7.3773,.1784,.4187;6.6449,.4582,-.3448;4.7464,1.2617,-2.2816;4.3877,.4857,-1.1911;2.7489,.8763,-3.6848;3.6661,1.7746,-3.1719;1.4389,2.6209,-4.6903;1.5936,1.2838,-4.415;.5689,2.9578,-5.2626;2.9202,-.452,-3.4359;3.0902,.1217,-1.0054;2.3828,-1.0311,-1.9868;.9123,-.8826,-1.8214;3.0733,-2.359,-1.8086;-.1569,-3.6469,.6964;-.0107,-5.1699,-4.7512;-.2419,-4.938,-3.708;-.8476,-4.3137,-1.0749;.7754,-4.5189,-2.8524;-1.5535,-5.0708,-3.248;-1.8573,-4.7543,-1.9262;.4848,-4.2206,-1.5195;1.8041,-4.404,-3.2015;-2.3465,-5.3913,-3.9274;-2.8909,-4.8277,-1.579;-1.0426,-3.8924,.2538;-2.1854,-3.6897,.8981;-3.0704,-4.1536,.4601;-2.1803,-3.5684,2.3666;-2.2349,-3.4083,5.166;-3.3713,-3.7991,3.0704;-1.0167,-3.263,3.0884;-1.0411,-3.1829,4.4776;-3.3974,-3.7219,4.4602;-4.2835,-4.0493,2.5219;-.0609,-3.107,2.5828;-.1142,-2.9626,5.015;-4.3311,-3.9137,4.9959;-2.2538,-3.3541,6.2581;1.3952,-3.8455,-.6111;2.1504,-3.326,-1.0566;.5423,.2836,-4.7354;-3.0967,-1.7633,.0542;-2.9401,-1.0254,1.2271;-1.8893,-.3674,1.5802;-.4212,.5192,1.2804;-.5376,1.4651,-.3173;.9438,-.7299,1.3919;-.386,1.6625,2.7636;-3.9234,-1.0384,2.1155;-3.7144,-.4367,3.3836;-.2736,.808,-1.1641;.2041,2.2848,-.2901;-1.5361,1.9142,-.4637;.9986,-1.1171,2.4226;1.9077,-.2521,1.1441;.8119,-1.5579,.6763;-.4185,1.0889,3.7069;.547,2.2552,2.7631;-1.2331,2.3713,2.7568;-2.8507,-.8875,3.8983;-4.6322,-.6301,3.9548;-3.5574,.6492,3.2778;4.8184,-.6477,.9934;4.4217,-1.985,.8687;3.7709,-2.6301,1.9133;3.5325,-1.9242,3.0886;3.9775,-.6179,3.2693;4.6289,.0133,2.2143;4.5507,-2.4948,-.0872;3.3983,-3.649,1.8003;2.6721,-2.5282,4.1111;3.7709,-.0977,4.2053;4.9485,1.0538,2.3187;-.765,.5077,-4.2849;-1.7506,-.4574,-4.4437;-1.4186,-1.6487,-5.0786;-.1423,-1.883,-5.5807;.8371,-.9159,-5.3975;-.9956,1.4312,-3.7475;-2.7613,-.3095,-4.063;-2.4368,-2.6941,-5.2039;.0754,-2.8228,-6.0886;1.8529,-1.1034,-5.7514;2.3096,-1.8259,5.0349;2.3289,-3.6822,3.9589;-2.2298,-3.5955,-5.9879;-3.4278,-2.6056,-4.5067;7.0862,1.1545,-1.5028;6.1363,1.546,-2.4907;8.4622,1.452,-1.7018;8.8894,2.0879,-2.8416;9.1798,1.1527,-.9316;9.9513,2.3058,-2.9866;6.6143,2.1836,-3.6695;7.9524,2.4465,-3.8401;5.9016,2.456,-4.4513;8.297,2.9305,-4.7583;3.4634,3.1768,-3.4083;2.3618,3.5893,-4.2149;4.2878,4.1877,-2.8381;4.0674,5.5184,-3.103;5.1059,3.9007,-2.1756;4.7175,6.2738,-2.6526;2.1679,4.9725,-4.4822;3.0053,5.9199,-3.9475;1.3272,5.2697,-5.1169;2.8455,6.9811,-4.1582;-4.488,-2.2486,-.2845;-4.4441,-3.0268,-1.0651;-5.0196,-2.6514,.5927;-5.1073,-1.4274,-.6925;-2.1859,-1.4423,-1.1047;-2.3337,-.4,-1.4424;-1.11,-1.555,-.891;-2.4095,-2.0898,-1.9657;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650350596992</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000784063005 0.000124005696 0.019081746084 0.005332100910</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030494547 -0.005994420 0.000037816 0.000174692 0.000272770 0.000300134 0.000377761 0.000430625 0.000592761 0.000705994 0.000909779 0.001074583 0.001170685 0.001226231 0.001285890 0.001365165 0.001535033 0.001711488 0.001746896 0.001844656 0.001992122 0.002343203 0.002412460 0.002551402 0.002677928 0.003001047 0.003088194 0.003313396 0.003740931 0.003791166 0.004122389 0.004576490 0.004751462 0.004866841 0.005656535 0.005855340 0.005943025 0.006290003 0.006653653 0.007379951 0.007718801 0.007965639 0.008798657 0.009196824 0.009621338 0.010395709 0.010719350 0.011321086 0.011674404 0.011888428 0.012671640 0.013047750 0.013797114 0.013964737 0.014674295 0.015149325 0.015434416 0.015523734 0.015857791 0.016578271 0.017188026 0.017324816 0.018632313 0.018745026 0.019362853 0.020344990 0.021125930 0.021166713 0.022258274 0.023027611 0.024737736 0.025650910 0.026232102 0.026480923 0.026981962 0.028656551 0.029123089 0.030942504 0.031872218 0.032122786 0.033334443 0.033964508 0.035500436 0.036029858 0.038097037 0.038890411 0.040069337 0.040343729 0.041295893 0.044263293 0.045050848 0.045159394 0.046808586 0.049097222 0.050054350 0.050562900 0.050781016 0.051138805 0.052419652 0.052461116 0.052760478 0.052839924 0.054124739 0.054544754 0.055237043 0.055796970 0.056382283 0.056460409 0.056888281 0.058159550 0.059749507 0.060448914 0.061295902 0.061605066 0.062644231 0.063150041 0.064803034 0.065016542 0.066197120 0.067389532 0.068176125 0.069648553 0.072418325 0.073800399 0.074059148 0.075897633 0.077325116 0.083199766 0.084562022 0.086360307 0.086799658 0.087362302 0.089965661 0.090389885 0.092755669 0.094533087 0.094987557 0.096201834 0.096864089 0.097563939 0.098563953 0.099379879 0.100040841 0.101862913 0.102183079 0.102707073 0.103119259 0.103810889 0.103898400 0.106461074 0.106671747 0.107127886 0.108805261 0.109840922 0.111377451 0.112044299 0.112859843 0.114459997 0.115984968 0.118720673 0.120251113 0.121115291 0.121777499 0.123444429 0.125112102 0.126099704 0.126768985 0.131394733 0.134646783 0.135375211 0.142290870 0.143183379 0.146658891 0.146980129 0.149437418 0.151348164 0.154259019 0.155444690 0.156466394 0.160101480 0.161452600 0.173079768 0.173607836 0.178138842 0.183728440 0.184608368 0.188861449 0.189798815 0.192934008 0.193671474 0.197824784 0.199620179 0.204589397 0.206724482 0.206860551 0.209649028 0.210897724 0.214598658 0.216473027 0.217260513 0.220116426 0.224631517 0.226037978 0.231584922 0.234593823 0.235072117 0.235501416 0.244307306 0.255561146 0.256837068 0.262446654 0.268278030 0.278954888 0.282762038 0.286117052 0.290264871 0.295070437 0.304051647 0.305415517 0.306754260 0.312089872 0.315297525 0.316387271 0.321824436 0.328443201 0.330860083 0.349436496 0.351392279 0.353490103 0.355095099 0.359601548 0.361927509 0.362280419 0.379856187 0.384551842 0.391001127 0.410016994 0.424950243 0.429264434 0.451039262 0.468015434 0.470865975 0.475771136 0.481947114 0.485957998 0.489590501 0.507748164 0.513389759 0.534645795 0.565775143 0.572455219 0.590703482 0.592851453 0.605688743 0.606705082 0.641616053 0.645541813 0.646555475 0.673841364 0.676208210 0.684391186 0.691292728 0.692235414 0.699019618 0.703941159 0.716064556 0.740926255 0.751067787 0.757655420 0.762818880 0.772140677 0.778564694 0.810126262 0.812148909 0.813998713 0.820758947 0.821410240 0.825841406 0.831023259 0.835010045 0.835675142 0.844907736 0.845230398 0.847615574 0.857768843 0.864321123 0.864774877 0.872771867 0.880148123 0.883876239 0.889056763 0.891714503 0.900268135 0.903141763 0.920064857 0.923095286 0.932312633 0.934550749 0.964400971 0.975581101 0.985144201 1.000491109 1.015881497 1.026200860 1.040882782 1.049111338 1.056873425 1.066971182 1.086051975 1.088216827 1.103146878 1.105514218 1.112127801 1.118566724 1.123196867 1.135046767 1.140208215 1.170669520 1.173673505 1.180070683 1.185272382 1.188126857 1.194313642 1.222498436 1.224666820 1.271530716 1.299361279 1.317637917 1.327544656 1.331278827 1.332832339 1.335295746 1.337529212 1.342285376 1.344789118 1.358147687 1.375047974 1.382374341 1.383571624 1.394586029 1.419340324 1.424702464 1.551251061 1.660563443 1.773636132</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">132</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3294058" y3="0.09627846" z3="-0.19125337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37671047" y3="0.17721408" z3="0.41905535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64435787" y3="0.45780709" z3="-0.34402954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74580005" y3="1.26023413" z3="-2.28111468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38689719" y3="0.48580893" z3="-1.18949804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74785302" y3="0.87314273" z3="-3.68305338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.66499135" y3="1.77244836" z3="-3.17131719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.4353355" y3="2.616958" z3="-4.68726081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.59181989" y3="1.27953144" z3="-4.41246644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.56418588" y3="2.95211364" z3="-5.2589098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91970237" y3="-0.45474633" z3="-3.43346092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0890125" y3="0.12275361" z3="-1.00355677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38385612" y3="-1.0326149" z3="-1.98339643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9130089" y3="-0.88653199" z3="-1.81893995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.07761324" y3="-2.35848335" z3="-1.80282716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15092733" y3="-3.64281627" z3="0.69651918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00248325" y3="-5.1646965" z3="-4.75100567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23032427" y3="-4.93339892" z3="-3.70818085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83973587" y3="-4.30943397" z3="-1.07601508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78642744" y3="-4.51878727" z3="-2.84984409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54367516" y3="-5.06102976" z3="-3.25149108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84939279" y3="-4.74413529" z3="-1.93033324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49391363" y3="-4.22120395" z3="-1.51734226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8167694" y3="-4.40699433" z3="-3.19714602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.33569343" y3="-5.37755862" z3="-3.93292048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8839278" y3="-4.81180225" z3="-1.58702738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03609614" y3="-3.88826405" z3="0.25248396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1800511" y3="-3.68797251" z3="0.894854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06344461" y3="-4.1515076" z3="0.45333615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17945146" y3="-3.56906078" z3="2.36320618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24457576" y3="-3.41347815" z3="5.1624645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37333365" y3="-3.79999554" z3="3.06204324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0178137" y3="-3.26694619" z3="3.08989483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0477233" y3="-3.18878088" z3="4.47913125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.4047332" y3="-3.7249207" z3="4.45172963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28384893" y3="-4.04855623" z3="2.50947683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05998538" y3="-3.11220687" z3="2.58850119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12298503" y3="-2.96998115" z3="5.02000126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34073666" y3="-3.91704342" z3="4.98349555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2680924" y3="-3.36052991" z3="6.25441535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40432993" y3="-3.84997366" z3="-0.60658849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.15927005" y3="-3.32854852" z3="-1.05061847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.54018597" y3="0.28179982" z3="-4.73042124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09516477" y3="-1.75976599" z3="0.05342344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93647095" y3="-1.02095412" z3="1.22563097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.88575933" y3="-0.36160189" z3="1.57669904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.4149197" y3="0.51927276" z3="1.27473947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.53652788" y3="1.46443917" z3="-0.32334265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94151907" y3="-0.74112878" z3="1.38579499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37312048" y3="1.6639478" z3="2.75817223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.91779788" y3="-1.03364559" z3="2.11652366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.70398809" y3="-0.43574209" z3="3.38555174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2786175" y3="0.80680117" z3="-1.17065564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.20888058" y3="2.28233412" z3="-0.30201392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.53439706" y3="1.91519196" z3="-0.4634168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.98914592" y3="-1.13294906" z3="2.41514677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.90992205" y3="-0.2711357" z3="1.14319832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.80383447" y3="-1.5646298" z3="0.66771943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4088178" y3="1.08927855" z3="3.70088215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56147088" y3="2.25363201" z3="2.75908129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21787694" y3="2.37562596" z3="2.75197988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.84047908" y3="-0.89017947" z3="3.89679886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.62096412" y3="-0.62827822" z3="3.95819371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.54392674" y3="0.65021342" z3="3.28301686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.81739019" y3="-0.64664847" z3="0.9957689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42197846" y3="-1.98450928" z3="0.872749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.769756" y3="-2.6285032" z3="1.91703528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.52902324" y3="-1.92117474" z3="3.09093224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97348614" y3="-0.61453225" z3="3.27061575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62585479" y3="0.01573549" z3="2.215614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55246204" y3="-2.49541965" z3="-0.08237752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39768433" y3="-3.64765598" z3="1.80478456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66623342" y3="-2.52390338" z3="4.11222866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.76580909" y3="-0.09348544" z3="4.20581089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.9443746" y3="1.05661718" z3="2.31895278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.76727012" y3="0.5087602" z3="-4.27872621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7550799" y3="-0.45484923" z3="-4.44002213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42611565" y3="-1.64721889" z3="-5.07159686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14978175" y3="-1.88460443" z3="-5.57571681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83231786" y3="-0.91796577" z3="-5.39098889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.99582845" y3="1.43311055" z3="-3.74347089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.76616164" y3="-0.30423812" z3="-4.05841106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44722219" y3="-2.68834742" z3="-5.19714979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06484255" y3="-2.82546428" z3="-6.08056711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84380993" y3="-1.11017762" z3="-5.74579329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.30668316" y3="-1.82250639" z3="5.03765009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31850034" y3="-3.67621598" z3="3.95745879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24367852" y3="-3.58936662" z3="-5.98262896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43716701" y3="-2.59858272" z3="-4.49756891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08572054" y3="1.15426233" z3="-1.50208498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13571647" y3="1.54402056" z3="-2.49068814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.46130384" y3="1.45448123" z3="-1.7001921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88805984" y3="2.09135259" z3="-2.83961209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17909906" y3="1.15765816" z3="-0.92916014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94932019" y3="2.31296833" z3="-2.9830929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61349417" y3="2.17965827" z3="-3.67054003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.95111603" y3="2.4453678" z3="-3.84003753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90057895" y3="2.44745404" z3="-4.45392398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.29563134" y3="2.92857221" z3="-4.75866194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.46152719" y3="3.1742695" z3="-3.40884149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.35833743" y3="3.58591141" z3="-4.21378252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.28700747" y3="4.1858861" z3="-2.84190418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.06497527" y3="5.51643796" z3="-3.10743226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.10688504" y3="3.90026827" z3="-2.18098169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.71622537" y3="6.27267518" z3="-2.65965062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.16278018" y3="4.96874337" z3="-4.48181372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="3.00041252" y3="5.91693894" z3="-3.94930123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.32077213" y3="5.26443845" z3="-5.1154126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.83947942" y3="6.97753701" z3="-4.16021426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48689443" y3="-2.24699697" z3="-0.28052593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44463504" y3="-3.02424397" z3="-1.06259381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01429717" y3="-2.65206149" z3="0.59840173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10984969" y3="-1.42662409" z3="-0.68495436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18801958" y3="-1.43959702" z3="-1.10865777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33813518" y3="-0.39842928" z3="-1.4476798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11101873" y3="-1.55099145" z3="-0.89895657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41415671" y3="-2.08896114" z3="-1.96804022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3294,.0963,-.1913;7.3767,.1772,.4191;6.6444,.4578,-.344;4.7458,1.2602,-2.2811;4.3869,.4858,-1.1895;2.7479,.8731,-3.6831;3.665,1.7724,-3.1713;1.4353,2.617,-4.6873;1.5918,1.2795,-4.4125;.5642,2.9521,-5.2589;2.9197,-.4547,-3.4335;3.089,.1228,-1.0036;2.3839,-1.0326,-1.9834;.913,-.8865,-1.8189;3.0776,-2.3585,-1.8028;-.1509,-3.6428,.6965;.0025,-5.1647,-4.751;-.2303,-4.9334,-3.7082;-.8397,-4.3094,-1.076;.7864,-4.5188,-2.8498;-1.5437,-5.061,-3.2515;-1.8494,-4.7441,-1.9303;.4939,-4.2212,-1.5173;1.8168,-4.407,-3.1971;-2.3357,-5.3776,-3.9329;-2.8839,-4.8118,-1.587;-1.0361,-3.8883,.2525;-2.1801,-3.688,.8949;-3.0634,-4.1515,.4533;-2.1795,-3.5691,2.3632;-2.2446,-3.4135,5.1625;-3.3733,-3.8,3.062;-1.0178,-3.2669,3.0899;-1.0477,-3.1888,4.4791;-3.4047,-3.7249,4.4517;-4.2838,-4.0486,2.5095;-.06,-3.1122,2.5885;-.123,-2.97,5.02;-4.3407,-3.917,4.9835;-2.2681,-3.3605,6.2544;1.4043,-3.85,-.6066;2.1593,-3.3285,-1.0506;.5402,.2818,-4.7304;-3.0952,-1.7598,.0534;-2.9365,-1.021,1.2256;-1.8858,-.3616,1.5767;-.4149,.5193,1.2747;-.5365,1.4644,-.3233;.9415,-.7411,1.3858;-.3731,1.6639,2.7582;-3.9178,-1.0336,2.1165;-3.704,-.4357,3.3856;-.2786,.8068,-1.1707;.2089,2.2823,-.302;-1.5344,1.9152,-.4634;.9891,-1.1329,2.4151;1.9099,-.2711,1.1432;.8038,-1.5646,.6677;-.4088,1.0893,3.7009;.5615,2.2536,2.7591;-1.2179,2.3756,2.752;-2.8405,-.8902,3.8968;-4.621,-.6283,3.9582;-3.5439,.6502,3.283;4.8174,-.6466,.9958;4.422,-1.9845,.8727;3.7698,-2.6285,1.917;3.529,-1.9212,3.0909;3.9735,-.6145,3.2706;4.6259,.0157,2.2156;4.5525,-2.4954,-.0824;3.3977,-3.6477,1.8048;2.6662,-2.5239,4.1122;3.7658,-.0935,4.2058;4.9444,1.0566,2.319;-.7673,.5088,-4.2787;-1.7551,-.4548,-4.44;-1.4261,-1.6472,-5.0716;-.1498,-1.8846,-5.5757;.8323,-.918,-5.391;-.9958,1.4331,-3.7435;-2.7662,-.3042,-4.0584;-2.4472,-2.6883,-5.1971;.0648,-2.8255,-6.0806;1.8438,-1.1102,-5.7458;2.3067,-1.8225,5.0377;2.3185,-3.6762,3.9575;-2.2437,-3.5894,-5.9826;-3.4372,-2.5986,-4.4976;7.0857,1.1543,-1.5021;6.1357,1.544,-2.4907;8.4613,1.4545,-1.7002;8.8881,2.0914,-2.8396;9.1791,1.1577,-.9292;9.9493,2.313,-2.9831;6.6135,2.1797,-3.6705;7.9511,2.4454,-3.84;5.9006,2.4475,-4.4539;8.2956,2.9286,-4.7587;3.4615,3.1743,-3.4088;2.3583,3.5859,-4.2138;4.287,4.1859,-2.8419;4.065,5.5164,-3.1074;5.1069,3.9003,-2.181;4.7162,6.2727,-2.6597;2.1628,4.9687,-4.4818;3.0004,5.9169,-3.9493;1.3208,5.2644,-5.1154;2.8395,6.9775,-4.1602;-4.4869,-2.247,-.2805;-4.4446,-3.0242,-1.0626;-5.0143,-2.6521,.5984;-5.1098,-1.4266,-.685;-2.188,-1.4396,-1.1087;-2.3381,-.3984,-1.4477;-1.111,-1.551,-.899;-2.4142,-2.089,-1.968;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650317688500</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005014429232 0.000606519623 0.019555800377 0.005338389116</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030494538 -0.000293541 0.000048731 0.000177087 0.000273408 0.000319074 0.000377824 0.000432455 0.000593080 0.000729843 0.000910392 0.001075338 0.001173520 0.001226798 0.001287356 0.001366694 0.001535254 0.001720514 0.001747428 0.001862307 0.002001004 0.002346232 0.002412489 0.002587326 0.002716020 0.003045169 0.003167656 0.003313411 0.003745273 0.003797889 0.004186737 0.004600934 0.004784434 0.004876529 0.005741664 0.005909849 0.005952504 0.006295880 0.006668310 0.007415233 0.007762891 0.007993210 0.008826124 0.009199731 0.009633691 0.010396955 0.010719723 0.011332519 0.011685672 0.011888982 0.012673473 0.013048174 0.013802880 0.013964995 0.014674602 0.015151061 0.015434382 0.015524215 0.015857817 0.016583830 0.017200021 0.017324885 0.018634249 0.018745167 0.019387891 0.020347358 0.021126688 0.021180172 0.022258566 0.023032235 0.024737859 0.025660122 0.026233720 0.026487580 0.026985205 0.028657998 0.029124734 0.030942425 0.031872390 0.032126968 0.033353666 0.033965605 0.035506933 0.036030741 0.038097405 0.038890354 0.040114783 0.040348246 0.041298253 0.044263060 0.045051255 0.045159464 0.046808495 0.049097233 0.050055572 0.050563257 0.050789395 0.051138763 0.052419912 0.052461184 0.052760684 0.052840190 0.054126018 0.054546909 0.055236983 0.055802653 0.056383457 0.056460678 0.056888509 0.058160121 0.059751361 0.060451178 0.061300091 0.061605689 0.062644473 0.063150656 0.064803612 0.065016804 0.066196893 0.067393689 0.068177310 0.069655336 0.072418369 0.073813519 0.074087843 0.075909276 0.077327442 0.083199687 0.084562001 0.086362571 0.086800454 0.087361914 0.089966939 0.090389785 0.092755711 0.094533483 0.095001129 0.096201820 0.096865403 0.097564199 0.098571833 0.099384962 0.100041902 0.101863779 0.102183092 0.102707925 0.103119313 0.103814383 0.103900062 0.106462215 0.106671929 0.107145510 0.108805904 0.109841594 0.111429376 0.112048774 0.112866888 0.114463712 0.115985130 0.118720591 0.120252053 0.121129265 0.121783096 0.123451836 0.125112028 0.126099529 0.126768978 0.131394939 0.134646872 0.135375155 0.142291309 0.143185324 0.146659241 0.146981186 0.149439406 0.151372854 0.154259734 0.155447481 0.156467124 0.160163617 0.161452910 0.173080011 0.173615860 0.178139493 0.183731670 0.184612031 0.188861951 0.189808891 0.192934496 0.193677580 0.197841206 0.199620402 0.204608953 0.206724307 0.206860222 0.209649229 0.210910096 0.214627051 0.216474083 0.217262268 0.220160423 0.224634279 0.226055959 0.231597542 0.234598644 0.235096347 0.235502485 0.244308607 0.255564682 0.256837162 0.262446638 0.268536896 0.278983737 0.282763867 0.286117603 0.290379993 0.295128346 0.304058640 0.305416488 0.306755266 0.312431542 0.315337677 0.316413629 0.321824774 0.328589380 0.330879982 0.349439538 0.351393867 0.353525329 0.355097182 0.359603212 0.361928751 0.362282236 0.380146754 0.384555970 0.391003281 0.410023524 0.424953961 0.429264904 0.451070601 0.468059978 0.470962962 0.475772358 0.481953026 0.486079563 0.489604390 0.507839401 0.513416204 0.534658857 0.565775130 0.572456545 0.590728448 0.592851440 0.605723810 0.606775860 0.641618216 0.645620817 0.646562429 0.673849441 0.676327891 0.684393209 0.691292759 0.692313693 0.699025703 0.703942024 0.716232198 0.740981549 0.751075502 0.757738648 0.762820488 0.772143848 0.778568036 0.810151338 0.812234378 0.814171407 0.820786953 0.821440606 0.825942625 0.831023564 0.835091296 0.835677745 0.844913804 0.845231428 0.847693655 0.857772532 0.864347906 0.864775513 0.872778584 0.880188482 0.883885761 0.889066487 0.891714514 0.900286523 0.903218795 0.920080501 0.923096106 0.932322479 0.934551158 0.964401909 0.975589288 0.985144232 1.000499270 1.015918204 1.026252143 1.040920001 1.049153432 1.056960523 1.067326325 1.086062225 1.088233339 1.103162896 1.105515409 1.112127842 1.118894415 1.123197524 1.135053489 1.140306336 1.170669524 1.173684142 1.180092762 1.185274780 1.188133076 1.194313700 1.223026856 1.224712576 1.271532165 1.299579579 1.317839946 1.327549222 1.331292661 1.332846392 1.335316374 1.338210184 1.342288388 1.344789671 1.358160720 1.375051037 1.382375176 1.383579378 1.396349429 1.419353465 1.425642277 1.551251143 1.660563445 1.773724687</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">133</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.32910969" y3="0.09542631" z3="-0.18990711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37615412" y3="0.18262149" z3="0.42237984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64325344" y3="0.4599259" z3="-0.34169242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74363156" y3="1.25767257" z3="-2.2800488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38608856" y3="0.48163437" z3="-1.18919363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74510214" y3="0.86964123" z3="-3.68136492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6619586" y3="1.76896595" z3="-3.16978305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.42870183" y3="2.61296724" z3="-4.68016475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58628092" y3="1.27614164" z3="-4.40649141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.55623129" y3="2.94937363" z3="-5.24877821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92031443" y3="-0.45882531" z3="-3.43529927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.08908121" y3="0.11415157" z3="-1.00450565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38780257" y3="-1.04242729" z3="-1.98623002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91652942" y3="-0.90276227" z3="-1.82007783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08580259" y3="-2.36644658" z3="-1.80858079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15001894" y3="-3.63960905" z3="0.69564766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01190605" y3="-5.1726897" z3="-4.74998293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22263633" y3="-4.93752694" z3="-3.70831274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83608574" y3="-4.30525997" z3="-1.07848945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79354182" y3="-4.52480416" z3="-2.84860208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.53715949" y3="-5.06031417" z3="-3.25374281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84475586" y3="-4.73943181" z3="-1.93396983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49894882" y3="-4.22301213" z3="-1.51738205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82480218" y3="-4.41758222" z3="-3.19276119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.32922671" y3="-5.37686863" z3="-3.93558413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88054322" y3="-4.80403234" z3="-1.59185666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03462474" y3="-3.88295863" z3="0.2493782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17934766" y3="-3.68434379" z3="0.89112403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06215457" y3="-4.14751368" z3="0.44806571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.18077795" y3="-3.56697426" z3="2.35979946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.25025106" y3="-3.41320617" z3="5.15940418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37619432" y3="-3.79603312" z3="3.05661096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0201832" y3="-3.26708088" z3="3.08874944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.05203951" y3="-3.19024601" z3="4.47818153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40984067" y3="-3.72164957" z3="4.44637624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28611756" y3="-4.04256478" z3="2.50251358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.06111744" y3="-3.1137881" z3="2.58908549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12706471" y3="-2.97451463" z3="5.02099586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34730127" y3="-3.91166468" z3="4.97625267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27508017" y3="-3.36131904" z3="6.25154056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40950923" y3="-3.85435037" z3="-0.60596674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16525988" y3="-3.33528475" z3="-1.05002436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53380183" y3="0.27637137" z3="-4.72480607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09582499" y3="-1.75548449" z3="0.05182687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93347231" y3="-1.01734268" z3="1.22403785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.88077552" y3="-0.35865074" z3="1.57181939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.40898444" y3="0.51948824" z3="1.26774429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.52143716" y3="1.46238529" z3="-0.33278068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.94789856" y3="-0.73550981" z3="1.38486445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36481713" y3="1.66819" z3="2.74662451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.9125672" y3="-1.02952623" z3="2.11719232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.69732505" y3="-0.42957983" z3="3.38468979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.26652683" y3="0.79980344" z3="-1.17806021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.22759695" y3="2.27598654" z3="-0.31131472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.51680418" y3="1.91825289" z3="-0.47705197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99511347" y3="-1.12261312" z3="2.41550643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91379362" y3="-0.26214857" z3="1.14147988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81644685" y3="-1.56091272" z3="0.66797296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39545101" y3="1.09934265" z3="3.69258269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57108024" y3="2.25682649" z3="2.73952549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20904623" y3="2.38038777" z3="2.74081311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.83132986" y3="-0.88056147" z3="3.89452909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.61179426" y3="-0.62382907" z3="3.96060163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.54097211" y3="0.65593928" z3="3.27877494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.81805171" y3="-0.64833719" z3="0.99686192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42230491" y3="-1.98607641" z3="0.87287113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76979602" y3="-2.6304711" z3="1.91683307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5298528" y3="-1.92381685" z3="3.09159296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.97504253" y3="-0.61757645" z3="3.27219067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.62731517" y3="0.01325882" z3="2.21738088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5528179" y3="-2.49642156" z3="-0.08260131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39707372" y3="-3.64926238" z3="1.80369006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.66735776" y3="-2.52657651" z3="4.11326876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.76755969" y3="-0.09707295" z3="4.20782845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.94633307" y3="1.05399192" z3="2.32149491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77306454" y3="0.50530075" z3="-4.27628874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76190028" y3="-0.45578633" z3="-4.43544969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43258201" y3="-1.64865298" z3="-5.070962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15646909" y3="-1.88811577" z3="-5.56919917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82580218" y3="-0.92462114" z3="-5.3858579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.00144139" y3="1.42998797" z3="-3.73912118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7726275" y3="-0.30342101" z3="-4.05715326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45411179" y3="-2.69110142" z3="-5.19709664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.05857106" y3="-2.82929463" z3="-6.07675886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84219561" y3="-1.11405725" z3="-5.73844396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.31238" y3="-1.82688996" z3="5.04186962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31537023" y3="-3.67724232" z3="3.95563638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2496198" y3="-3.59208796" z3="-5.98223198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44494463" y3="-2.6005643" z3="-4.50043952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08340252" y3="1.15588733" z3="-1.50003412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13304725" y3="1.54473137" z3="-2.48859043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45851657" y3="1.45669619" z3="-1.6983844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88443168" y3="2.09349958" z3="-2.83796822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17637505" y3="1.15983077" z3="-0.92750931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94545948" y3="2.31449591" z3="-2.98217043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.61006341" y3="2.18319671" z3="-3.66745045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94733419" y3="2.44976103" z3="-3.83721319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8971295" y3="2.45410877" z3="-4.44943791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.29125749" y3="2.93500592" z3="-4.75514042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.45646583" y3="3.17106594" z3="-3.40452835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.35153176" y3="3.58232218" z3="-4.20719484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.28082561" y3="4.18332706" z3="-2.83630891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.05675684" y3="5.51384082" z3="-3.09926922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.10190908" y3="3.89753014" z3="-2.17701068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.7070718" y3="6.27015091" z3="-2.65053972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.15364565" y3="4.96540349" z3="-4.47237003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.99080784" y3="5.91402931" z3="-3.93948315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.31004897" y3="5.26140139" z3="-5.1036443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.82778861" y3="6.97507952" z3="-4.14834767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48816715" y3="-2.24109575" z3="-0.28068396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44725638" y3="-3.01953348" z3="-1.06129071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01623971" y3="-2.64397069" z3="0.59832888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10927007" y3="-1.42003882" z3="-0.68628093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19074944" y3="-1.43483246" z3="-1.11120342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34142623" y3="-0.39277257" z3="-1.44945643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1140236" y3="-1.54645436" z3="-0.90218859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41722899" y3="-2.08334482" z3="-1.97046747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3291,.0954,-.1899;7.3762,.1826,.4224;6.6433,.4599,-.3417;4.7436,1.2577,-2.28;4.3861,.4816,-1.1892;2.7451,.8696,-3.6814;3.662,1.769,-3.1698;1.4287,2.613,-4.6802;1.5863,1.2761,-4.4065;.5562,2.9494,-5.2488;2.9203,-.4588,-3.4353;3.0891,.1142,-1.0045;2.3878,-1.0424,-1.9862;.9165,-.9028,-1.8201;3.0858,-2.3664,-1.8086;-.15,-3.6396,.6956;.0119,-5.1727,-4.75;-.2226,-4.9375,-3.7083;-.8361,-4.3053,-1.0785;.7935,-4.5248,-2.8486;-1.5372,-5.0603,-3.2537;-1.8448,-4.7394,-1.934;.4989,-4.223,-1.5174;1.8248,-4.4176,-3.1928;-2.3292,-5.3769,-3.9356;-2.8805,-4.804,-1.5919;-1.0346,-3.883,.2494;-2.1793,-3.6843,.8911;-3.0622,-4.1475,.4481;-2.1808,-3.567,2.3598;-2.2503,-3.4132,5.1594;-3.3762,-3.796,3.0566;-1.0202,-3.2671,3.0887;-1.052,-3.1902,4.4782;-3.4098,-3.7216,4.4464;-4.2861,-4.0426,2.5025;-.0611,-3.1138,2.5891;-.1271,-2.9745,5.021;-4.3473,-3.9117,4.9763;-2.2751,-3.3613,6.2515;1.4095,-3.8544,-.606;2.1653,-3.3353,-1.05;.5338,.2764,-4.7248;-3.0958,-1.7555,.0518;-2.9335,-1.0173,1.224;-1.8808,-.3587,1.5718;-.409,.5195,1.2677;-.5214,1.4624,-.3328;.9479,-.7355,1.3849;-.3648,1.6682,2.7466;-3.9126,-1.0295,2.1172;-3.6973,-.4296,3.3847;-.2665,.7998,-1.1781;.2276,2.276,-.3113;-1.5168,1.9183,-.4771;.9951,-1.1226,2.4155;1.9138,-.2621,1.1415;.8164,-1.5609,.668;-.3955,1.0993,3.6926;.5711,2.2568,2.7395;-1.209,2.3804,2.7408;-2.8313,-.8806,3.8945;-4.6118,-.6238,3.9606;-3.541,.6559,3.2788;4.8181,-.6483,.9969;4.4223,-1.9861,.8729;3.7698,-2.6305,1.9168;3.5299,-1.9238,3.0916;3.975,-.6176,3.2722;4.6273,.0133,2.2174;4.5528,-2.4964,-.0826;3.3971,-3.6493,1.8037;2.6674,-2.5266,4.1133;3.7676,-.0971,4.2078;4.9463,1.054,2.3215;-.7731,.5053,-4.2763;-1.7619,-.4558,-4.4354;-1.4326,-1.6487,-5.071;-.1565,-1.8881,-5.5692;.8258,-.9246,-5.3859;-1.0014,1.43,-3.7391;-2.7726,-.3034,-4.0572;-2.4541,-2.6911,-5.1971;.0586,-2.8293,-6.0768;1.8422,-1.1141,-5.7384;2.3124,-1.8269,5.0419;2.3154,-3.6772,3.9556;-2.2496,-3.5921,-5.9822;-3.4449,-2.6006,-4.5004;7.0834,1.1559,-1.5;6.133,1.5447,-2.4886;8.4585,1.4567,-1.6984;8.8844,2.0935,-2.838;9.1764,1.1598,-.9275;9.9455,2.3145,-2.9822;6.6101,2.1832,-3.6675;7.9473,2.4498,-3.8372;5.8971,2.4541,-4.4494;8.2913,2.935,-4.7551;3.4565,3.1711,-3.4045;2.3515,3.5823,-4.2072;4.2808,4.1833,-2.8363;4.0568,5.5138,-3.0993;5.1019,3.8975,-2.177;4.7071,6.2702,-2.6505;2.1536,4.9654,-4.4724;2.9908,5.914,-3.9395;1.31,5.2614,-5.1036;2.8278,6.9751,-4.1483;-4.4882,-2.2411,-.2807;-4.4473,-3.0195,-1.0613;-5.0162,-2.644,.5983;-5.1093,-1.42,-.6863;-2.1907,-1.4348,-1.1112;-2.3414,-.3928,-1.4495;-1.114,-1.5465,-.9022;-2.4172,-2.0833,-1.9705;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650344441367</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003649685851 0.000385786710 0.020540881984 0.005335458809</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030494411 -0.001226721 0.000141050 0.000244357 0.000278804 0.000368765 0.000390515 0.000437342 0.000593240 0.000739568 0.000912201 0.001081115 0.001172295 0.001228123 0.001292536 0.001367411 0.001541617 0.001717029 0.001749710 0.001858769 0.002004699 0.002367023 0.002414718 0.002597154 0.002771428 0.003059914 0.003186111 0.003330486 0.003742989 0.003793807 0.004188868 0.004613506 0.004795505 0.004879077 0.005764776 0.005919453 0.005995538 0.006316157 0.006681668 0.007432321 0.007773056 0.008020672 0.008873721 0.009205427 0.009637379 0.010409844 0.010723966 0.011337911 0.011677789 0.011888699 0.012675984 0.013048604 0.013798094 0.013966567 0.014679612 0.015150688 0.015434882 0.015531222 0.015857834 0.016583690 0.017206884 0.017324471 0.018634659 0.018745021 0.019401409 0.020347797 0.021126263 0.021176470 0.022258668 0.023036135 0.024738111 0.025661905 0.026232103 0.026491089 0.026981301 0.028659501 0.029126222 0.030943203 0.031873329 0.032125133 0.033382017 0.033966115 0.035521247 0.036031138 0.038097984 0.038891751 0.040127149 0.040357462 0.041298413 0.044264044 0.045052687 0.045182596 0.046811068 0.049097229 0.050055278 0.050563112 0.050801527 0.051139068 0.052420516 0.052461181 0.052761249 0.052840426 0.054127980 0.054549260 0.055237798 0.055811019 0.056383936 0.056460457 0.056889501 0.058164282 0.059751509 0.060452497 0.061309930 0.061606382 0.062648349 0.063154074 0.064804306 0.065016737 0.066199159 0.067394092 0.068176534 0.069661705 0.072418474 0.073835731 0.074135063 0.075927919 0.077331434 0.083200571 0.084562147 0.086364653 0.086801458 0.087363158 0.089969035 0.090390213 0.092755759 0.094533410 0.095026696 0.096204920 0.096869938 0.097565442 0.098582155 0.099395733 0.100047549 0.101864195 0.102190806 0.102709306 0.103120077 0.103817941 0.103916907 0.106466882 0.106681313 0.107151163 0.108805726 0.109843679 0.111462857 0.112058424 0.112866058 0.114463001 0.115985244 0.118724568 0.120252789 0.121136755 0.121795319 0.123462097 0.125112998 0.126100566 0.126769072 0.131394883 0.134646560 0.135379816 0.142291159 0.143193002 0.146661426 0.146981241 0.149441793 0.151409851 0.154285787 0.155449791 0.156467088 0.160199904 0.161453559 0.173080371 0.173617456 0.178143753 0.183736640 0.184613718 0.188862391 0.189818012 0.192935860 0.193682693 0.197864503 0.199623093 0.204629974 0.206724712 0.206860818 0.209649439 0.210928643 0.214638408 0.216474219 0.217268003 0.220205581 0.224635628 0.226064403 0.231603408 0.234602005 0.235116970 0.235502538 0.244310785 0.255564259 0.256837144 0.262447991 0.268703938 0.279004290 0.282763677 0.286117758 0.290451319 0.295168097 0.304059037 0.305419218 0.306755215 0.312561066 0.315386953 0.316415345 0.321825131 0.328635532 0.330928097 0.349444414 0.351421241 0.353568287 0.355098911 0.359610965 0.361933486 0.362282874 0.380354522 0.384667459 0.391004988 0.410027597 0.424954076 0.429276204 0.451070083 0.468071610 0.470961155 0.475773346 0.481953117 0.486137652 0.489603982 0.507852034 0.513430011 0.534658742 0.565776716 0.572456371 0.590737506 0.592851662 0.605725553 0.606773471 0.641620846 0.645631980 0.646595750 0.673849298 0.676378101 0.684393665 0.691293479 0.692319138 0.699030440 0.703942972 0.716267616 0.740992564 0.751077394 0.757744928 0.762822428 0.772144133 0.778567998 0.810163601 0.812232842 0.814180059 0.820824868 0.821462176 0.825942096 0.831030467 0.835099289 0.835705150 0.844916499 0.845248073 0.847695955 0.857773406 0.864352314 0.864775608 0.872785993 0.880188876 0.883885670 0.889069224 0.891716527 0.900308468 0.903224732 0.920080546 0.923096860 0.932329557 0.934555165 0.964408072 0.975590259 0.985145041 1.000505754 1.015925020 1.026277118 1.040923587 1.049176741 1.056970172 1.067420861 1.086071738 1.088233068 1.103167377 1.105517142 1.112128246 1.118974389 1.123198746 1.135055814 1.140324612 1.170670021 1.173685295 1.180093782 1.185276279 1.188138693 1.194313708 1.223169642 1.224713547 1.271534113 1.299604699 1.317926367 1.327549280 1.331299807 1.332853307 1.335320942 1.338335620 1.342288564 1.344789989 1.358174597 1.375051149 1.382378859 1.383586514 1.397153599 1.419358257 1.426052074 1.551251200 1.660567361 1.773796943</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">134</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33025929" y3="0.09067993" z3="-0.19002834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37669964" y3="0.18146854" z3="0.42194363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64346697" y3="0.45815457" z3="-0.34173812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74210673" y3="1.25572799" z3="-2.27805096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38666274" y3="0.47657286" z3="-1.18867668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74316383" y3="0.86780086" z3="-3.67904683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6587415" y3="1.76761482" z3="-3.16530005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.42308786" y3="2.61247221" z3="-4.67142633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58334612" y3="1.2741988" z3="-4.40299819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54962194" y3="2.94851867" z3="-5.2389883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92090299" y3="-0.46074439" z3="-3.43615926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09077096" y3="0.10675579" z3="-1.00420509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.38975332" y3="-1.04802944" z3="-1.98803901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91837806" y3="-0.90896645" z3="-1.82118778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08831052" y3="-2.37217631" z3="-1.81303193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14991474" y3="-3.63533254" z3="0.69149415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01097027" y3="-5.18641944" z3="-4.74918574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22350989" y3="-4.94748708" z3="-3.70827466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83637014" y3="-4.30637149" z3="-1.08034496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79302313" y3="-4.53378156" z3="-2.84940143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.53860638" y3="-5.06596522" z3="-3.25402313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84606643" y3="-4.74043979" z3="-1.93523921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49853111" y3="-4.22714651" z3="-1.5191538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82468318" y3="-4.43035808" z3="-3.19398169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.33100245" y3="-5.38326598" z3="-3.93535214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88210915" y3="-4.80238662" z3="-1.59362718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03448472" y3="-3.8804699" z3="0.246681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17879996" y3="-3.68075001" z3="0.88881188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0624278" y3="-4.14302649" z3="0.44611262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17977802" y3="-3.56182702" z3="2.35716614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24708697" y3="-3.40704885" z3="5.15670421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3749745" y3="-3.7891721" z3="3.05495302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01806404" y3="-3.26317466" z3="3.08508641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04907056" y3="-3.18577805" z3="4.47442613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40748234" y3="-3.71433953" z3="4.44473902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28555809" y3="-4.03488052" z3="2.50167979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0589999" y3="-3.11139886" z3="2.58464149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.12404315" y3="-2.97054788" z3="5.0165508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3444569" y3="-3.90342052" z3="4.97554792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.27105429" y3="-3.3548638" z3="6.24879513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4088892" y3="-3.85684532" z3="-0.60871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16605918" y3="-3.34094604" z3="-1.05410486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53197486" y3="0.27503527" z3="-4.72324062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09408623" y3="-1.74979033" z3="0.04904408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93095614" y3="-1.01099369" z3="1.21997007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8795361" y3="-0.3511218" z3="1.5666498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.40593084" y3="0.5255772" z3="1.26275757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.51284041" y3="1.46073702" z3="-0.34187861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95024441" y3="-0.7334144" z3="1.38649135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36546533" y3="1.68036105" z3="2.73659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90941766" y3="-1.02325208" z3="2.11360543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.69220729" y3="-0.4232746" z3="3.38112203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.25654525" y3="0.79566692" z3="-1.18401666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.23877086" y3="2.27186591" z3="-0.32085134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.50614774" y3="1.92036233" z3="-0.4907341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.99539992" y3="-1.12129382" z3="2.41787823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92002405" y3="-0.26239782" z3="1.14565815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.81589547" y3="-1.5603037" z3="0.66905149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40072775" y3="1.11449641" z3="3.68478184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57005099" y3="2.26858045" z3="2.73048056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20893686" y3="2.39351534" z3="2.72356044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.82744191" y3="-0.87810799" z3="3.89100276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60790154" y3="-0.6139337" z3="3.95638578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.53145917" y3="0.66266831" z3="3.27608786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82055574" y3="-0.65361036" z3="0.99681287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42248708" y3="-1.99047925" z3="0.87230926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77061487" y3="-2.63466599" z3="1.91667221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53331104" y3="-1.92859784" z3="3.09210208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98081434" y3="-0.62329297" z3="3.27311894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.63261411" y3="0.00733387" z3="2.21798999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.55088481" y3="-2.50023718" z3="-0.08380723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39626068" y3="-3.65275256" z3="1.80336509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67178051" y3="-2.53115601" z3="4.1146211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.77538708" y3="-0.10325021" z3="4.20938367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.95328824" y3="1.04744985" z3="2.32239472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77796972" y3="0.50241681" z3="-4.27896194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76537926" y3="-0.46152414" z3="-4.44223847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43385287" y3="-1.6548874" z3="-5.06950927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15527712" y3="-1.89235878" z3="-5.56782856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82605867" y3="-0.92628445" z3="-5.38085983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0098222" y3="1.42795929" z3="-3.74705115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77816488" y3="-0.31049134" z3="-4.06632903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45389634" y3="-2.69749364" z3="-5.19782386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06218651" y3="-2.83370264" z3="-6.07072739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.840723" y3="-1.11900087" z3="-5.73051069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.32014412" y3="-1.83214985" z3="5.0447292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31716929" y3="-3.68085308" z3="3.95609343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2473941" y3="-3.59844603" z3="-5.98252381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44577593" y3="-2.60816708" z3="-4.50089818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08221791" y3="1.15663748" z3="-1.49951324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.13073785" y3="1.54569758" z3="-2.48690425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45707556" y3="1.45940986" z3="-1.69843421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.88177157" y3="2.09836065" z3="-2.83751118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17585241" y3="1.16174862" z3="-0.92870791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.94282267" y3="2.3203295" z3="-2.98248932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.60597067" y3="2.18661047" z3="-3.6649327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.94301773" y3="2.45481912" z3="-3.83532161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89178241" y3="2.4574016" z3="-4.44608308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.28560508" y3="2.94125661" z3="-4.75284871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.45070412" y3="3.17006654" z3="-3.3954943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.34454979" y3="3.582127" z3="-4.19596011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.27411397" y3="4.18153529" z3="-2.82491784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.04790761" y3="5.51250445" z3="-3.08365483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.09589392" y3="3.89500987" z3="-2.16684918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.69735311" y3="6.26839217" z3="-2.63298668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.14460439" y3="4.96560135" z3="-4.45701077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.98086065" y3="5.9137647" z3="-3.92192004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.3002207" y3="5.26208982" z3="-5.08699273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.81667188" y3="6.97504807" z3="-4.12780679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48755747" y3="-2.23439018" z3="-0.28172848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44913256" y3="-3.01661812" z3="-1.05913064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01662901" y3="-2.63194771" z3="0.59961526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10691099" y3="-1.41396864" z3="-0.69114118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18863817" y3="-1.43243869" z3="-1.11474233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33675162" y3="-0.39085841" z3="-1.45408666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11126399" y3="-1.54707362" z3="-0.90751543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41926303" y3="-2.08179387" z3="-1.97294719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3303,.0907,-.19;7.3767,.1815,.4219;6.6435,.4582,-.3417;4.7421,1.2557,-2.2781;4.3867,.4766,-1.1887;2.7432,.8678,-3.679;3.6587,1.7676,-3.1653;1.4231,2.6125,-4.6714;1.5833,1.2742,-4.403;.5496,2.9485,-5.239;2.9209,-.4607,-3.4362;3.0908,.1068,-1.0042;2.3898,-1.048,-1.988;.9184,-.909,-1.8212;3.0883,-2.3722,-1.813;-.1499,-3.6353,.6915;.011,-5.1864,-4.7492;-.2235,-4.9475,-3.7083;-.8364,-4.3064,-1.0803;.793,-4.5338,-2.8494;-1.5386,-5.066,-3.254;-1.8461,-4.7404,-1.9352;.4985,-4.2271,-1.5192;1.8247,-4.4304,-3.194;-2.331,-5.3833,-3.9354;-2.8821,-4.8024,-1.5936;-1.0345,-3.8805,.2467;-2.1788,-3.6808,.8888;-3.0624,-4.143,.4461;-2.1798,-3.5618,2.3572;-2.2471,-3.407,5.1567;-3.375,-3.7892,3.055;-1.0181,-3.2632,3.0851;-1.0491,-3.1858,4.4744;-3.4075,-3.7143,4.4447;-4.2856,-4.0349,2.5017;-.059,-3.1114,2.5846;-.124,-2.9705,5.0166;-4.3445,-3.9034,4.9755;-2.2711,-3.3549,6.2488;1.4089,-3.8568,-.6087;2.1661,-3.3409,-1.0541;.532,.275,-4.7232;-3.0941,-1.7498,.049;-2.931,-1.011,1.22;-1.8795,-.3511,1.5666;-.4059,.5256,1.2628;-.5128,1.4607,-.3419;.9502,-.7334,1.3865;-.3655,1.6804,2.7366;-3.9094,-1.0233,2.1136;-3.6922,-.4233,3.3811;-.2565,.7957,-1.184;.2388,2.2719,-.3209;-1.5061,1.9204,-.4907;.9954,-1.1213,2.4179;1.92,-.2624,1.1457;.8159,-1.5603,.6691;-.4007,1.1145,3.6848;.5701,2.2686,2.7305;-1.2089,2.3935,2.7236;-2.8274,-.8781,3.891;-4.6079,-.6139,3.9564;-3.5315,.6627,3.2761;4.8206,-.6536,.9968;4.4225,-1.9905,.8723;3.7706,-2.6347,1.9167;3.5333,-1.9286,3.0921;3.9808,-.6233,3.2731;4.6326,.0073,2.218;4.5509,-2.5002,-.0838;3.3963,-3.6528,1.8034;2.6718,-2.5312,4.1146;3.7754,-.1033,4.2094;4.9533,1.0474,2.3224;-.778,.5024,-4.279;-1.7654,-.4615,-4.4422;-1.4339,-1.6549,-5.0695;-.1553,-1.8924,-5.5678;.8261,-.9263,-5.3809;-1.0098,1.428,-3.7471;-2.7782,-.3105,-4.0663;-2.4539,-2.6975,-5.1978;.0622,-2.8337,-6.0707;1.8407,-1.119,-5.7305;2.3201,-1.8321,5.0447;2.3172,-3.6809,3.9561;-2.2474,-3.5984,-5.9825;-3.4458,-2.6082,-4.5009;7.0822,1.1566,-1.4995;6.1307,1.5457,-2.4869;8.4571,1.4594,-1.6984;8.8818,2.0984,-2.8375;9.1759,1.1617,-.9287;9.9428,2.3203,-2.9825;6.606,2.1866,-3.6649;7.943,2.4548,-3.8353;5.8918,2.4574,-4.4461;8.2856,2.9413,-4.7528;3.4507,3.1701,-3.3955;2.3445,3.5821,-4.196;4.2741,4.1815,-2.8249;4.0479,5.5125,-3.0837;5.0959,3.895,-2.1668;4.6974,6.2684,-2.633;2.1446,4.9656,-4.457;2.9809,5.9138,-3.9219;1.3002,5.2621,-5.087;2.8167,6.975,-4.1278;-4.4876,-2.2344,-.2817;-4.4491,-3.0166,-1.0591;-5.0166,-2.6319,.5996;-5.1069,-1.414,-.6911;-2.1886,-1.4324,-1.1147;-2.3368,-.3909,-1.4541;-1.1113,-1.5471,-.9075;-2.4193,-2.0818,-1.9729;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650355974391</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004908979061 0.000477749644 0.020940621176 0.005338483302</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030494361 -0.000858490 0.000146593 0.000231139 0.000279471 0.000362162 0.000389026 0.000436539 0.000593487 0.000750445 0.000911904 0.001080321 0.001172370 0.001233160 0.001296669 0.001367380 0.001554594 0.001716281 0.001751717 0.001859406 0.002005134 0.002381284 0.002447601 0.002597996 0.002781665 0.003059497 0.003186130 0.003353311 0.003784212 0.003798889 0.004199530 0.004613682 0.004794829 0.004889777 0.005769892 0.005919991 0.006020678 0.006333078 0.006686575 0.007431726 0.007775966 0.008034151 0.008917354 0.009210249 0.009643873 0.010409950 0.010733690 0.011337584 0.011681203 0.011889393 0.012677431 0.013048556 0.013806239 0.013975259 0.014692583 0.015151498 0.015439687 0.015549207 0.015857868 0.016583576 0.017207820 0.017324039 0.018634702 0.018744855 0.019415310 0.020348112 0.021126149 0.021178483 0.022260330 0.023036705 0.024740540 0.025665326 0.026231454 0.026490719 0.026980184 0.028660129 0.029126292 0.030947355 0.031880064 0.032127837 0.033402032 0.033968768 0.035526785 0.036032332 0.038099479 0.038899817 0.040130165 0.040367016 0.041300273 0.044270508 0.045058339 0.045253151 0.046815563 0.049097254 0.050062610 0.050563888 0.050808404 0.051140040 0.052421564 0.052461236 0.052761741 0.052842255 0.054132459 0.054548730 0.055238673 0.055816541 0.056384105 0.056460511 0.056890102 0.058167543 0.059751491 0.060452311 0.061315168 0.061606758 0.062656259 0.063157314 0.064804161 0.065016820 0.066208707 0.067397205 0.068183642 0.069660782 0.072418509 0.073850486 0.074160268 0.075946398 0.077338021 0.083201342 0.084566346 0.086370803 0.086801387 0.087362898 0.089968682 0.090390153 0.092755552 0.094533377 0.095057619 0.096208974 0.096873750 0.097569030 0.098598941 0.099407085 0.100057515 0.101865085 0.102205778 0.102711007 0.103126769 0.103822063 0.103922610 0.106485896 0.106704081 0.107153879 0.108809310 0.109847947 0.111480493 0.112068955 0.112865983 0.114465570 0.115985802 0.118733162 0.120256355 0.121142437 0.121813312 0.123463420 0.125113093 0.126101675 0.126769197 0.131398279 0.134647239 0.135385259 0.142293007 0.143196871 0.146674709 0.146981229 0.149443817 0.151480193 0.154321292 0.155451333 0.156466742 0.160267823 0.161458396 0.173081120 0.173618838 0.178149207 0.183743375 0.184616986 0.188863442 0.189839142 0.192938920 0.193689521 0.197889460 0.199624796 0.204684606 0.206726046 0.206863520 0.209649505 0.210949351 0.214657489 0.216475009 0.217280566 0.220244517 0.224637367 0.226075004 0.231609700 0.234609215 0.235144024 0.235502951 0.244317166 0.255564509 0.256837126 0.262450063 0.268860973 0.279023241 0.282763704 0.286117794 0.290536558 0.295212160 0.304059646 0.305422205 0.306758282 0.312633992 0.315469479 0.316418385 0.321825176 0.328680669 0.331001455 0.349450855 0.351474431 0.353623256 0.355100639 0.359634717 0.361946905 0.362284683 0.380626389 0.384928103 0.391006949 0.410029771 0.424954299 0.429289120 0.451070134 0.468082779 0.470963433 0.475773438 0.481953213 0.486198286 0.489611762 0.507858072 0.513441992 0.534658853 0.565778094 0.572456475 0.590748383 0.592852124 0.605725517 0.606804153 0.641626201 0.645632186 0.646694820 0.673850699 0.676427910 0.684394012 0.691296413 0.692320696 0.699030792 0.703943555 0.716291644 0.741002385 0.751078467 0.757756680 0.762836807 0.772144712 0.778568011 0.810164506 0.812236976 0.814187560 0.820864314 0.821479741 0.825942494 0.831040543 0.835099977 0.835762535 0.844927906 0.845287316 0.847699226 0.857773698 0.864361231 0.864775731 0.872808139 0.880194292 0.883889736 0.889070665 0.891717085 0.900338377 0.903224682 0.920080502 0.923097904 0.932372295 0.934567654 0.964423069 0.975590678 0.985149022 1.000509884 1.015928988 1.026305270 1.040925427 1.049196426 1.056979477 1.067492568 1.086081615 1.088233689 1.103169802 1.105517100 1.112128337 1.119063436 1.123200870 1.135057105 1.140335400 1.170672579 1.173688357 1.180094584 1.185279414 1.188157264 1.194313776 1.223289629 1.224738188 1.271538098 1.299637022 1.318000856 1.327560160 1.331304970 1.332865783 1.335320963 1.338450328 1.342288617 1.344791000 1.358174716 1.375051334 1.382386951 1.383602780 1.398514639 1.419363683 1.426720604 1.551251256 1.660567628 1.773894290</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">135</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33210162" y3="0.08582643" z3="-0.19029677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37861039" y3="0.17958548" z3="0.42103911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6445181" y3="0.4564802" z3="-0.3417563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74076504" y3="1.25331012" z3="-2.27580007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38722787" y3="0.47160352" z3="-1.18785514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74174968" y3="0.86514503" z3="-3.6765848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65606523" y3="1.7650786" z3="-3.16132196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.41901036" y3="2.60960622" z3="-4.66507992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.58115927" y3="1.27133624" z3="-4.39926199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54526543" y3="2.94586969" z3="-5.23196653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92150984" y3="-0.46368745" z3="-3.43602965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09195999" y3="0.09946998" z3="-1.00322763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39022506" y3="-1.05326493" z3="-1.98880718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.91899803" y3="-0.91359998" z3="-1.82123286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.08780699" y3="-2.378099" z3="-1.81602215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14982469" y3="-3.63382531" z3="0.68781214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00395124" y3="-5.19502276" z3="-4.75002774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22933807" y3="-4.95375434" z3="-3.70944339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83944129" y3="-4.30644897" z3="-1.08233851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78865477" y3="-4.54047154" z3="-2.85171308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54396586" y3="-5.06990123" z3="-3.25399729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84995124" y3="-4.74142617" z3="-1.93568196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49580721" y3="-4.23125048" z3="-1.52181748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82040743" y3="-4.4399064" z3="-3.19651964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.33718692" y3="-5.38767569" z3="-3.93418521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88559354" y3="-4.802345" z3="-1.59324084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03567767" y3="-3.87771888" z3="0.24394137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17911776" y3="-3.6763509" z3="0.88724154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06305227" y3="-4.13970421" z3="0.44705515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17743428" y3="-3.55577664" z3="2.35566305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.24093313" y3="-3.39771775" z3="5.15498678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3721387" y3="-3.780339" z3="3.05529587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.01436192" y3="-3.25810013" z3="3.08163867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.04340479" y3="-3.17915529" z3="4.47093053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40284591" y3="-3.70378907" z3="4.44495121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28405817" y3="-4.02457974" z3="2.50339189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05587558" y3="-3.10790717" z3="2.57980841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11704497" y3="-2.9653762" z3="5.01181894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3397749" y3="-3.89020395" z3="4.97717721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26348095" y3="-3.34404664" z3="6.24698383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40885636" y3="-3.86307706" z3="-0.61192638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16517695" y3="-3.34737041" z3="-1.05764978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53122627" y3="0.27031548" z3="-4.72180945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0937964" y3="-1.74820728" z3="0.04545229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92913947" y3="-1.00799985" z3="1.21580583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.87476629" y3="-0.35031256" z3="1.56037999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.4039495" y3="0.5273625" z3="1.25698535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.50777896" y3="1.45940332" z3="-0.34987129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95316846" y3="-0.72734353" z3="1.3889576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36743381" y3="1.68853756" z3="2.72685657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90677476" y3="-1.01709527" z3="2.11076705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.68845649" y3="-0.41478631" z3="3.37678604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2540479" y3="0.79120503" z3="-1.19114845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.24738803" y3="2.26737007" z3="-0.3299953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.49924828" y3="1.92225901" z3="-0.49992627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.9980906" y3="-1.10746791" z3="2.42235652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.91827536" y3="-0.25291791" z3="1.14544716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82698772" y3="-1.55795319" z3="0.67780865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40660364" y3="1.12761743" z3="3.67756312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56858314" y3="2.27616091" z3="2.72204393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21036898" y3="2.40189421" z3="2.70791995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.82396455" y3="-0.86778977" z3="3.88739572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60363841" y3="-0.60417842" z3="3.95348245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.52819669" y3="0.67010421" z3="3.26866592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82343026" y3="-0.66005155" z3="0.99602452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42211188" y3="-1.99600711" z3="0.87039269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77029488" y3="-2.63991179" z3="1.91496817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5360772" y3="-1.93448276" z3="3.09153487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.98693968" y3="-0.63036372" z3="3.27357162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6387807" y3="-0.00010842" z3="2.21832216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54777628" y3="-2.50514533" z3="-0.08651536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39387699" y3="-3.65727967" z3="1.80125303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67500785" y3="-2.53634831" z3="4.11476924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.78409313" y3="-0.11081879" z3="4.21073497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.96176208" y3="1.03929375" z3="2.32329024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.77779587" y3="0.49813494" z3="-4.27887989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76424123" y3="-0.46476944" z3="-4.44063462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43028717" y3="-1.65828499" z3="-5.07392195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15229299" y3="-1.89631013" z3="-5.56675246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82766899" y3="-0.93104242" z3="-5.38097062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01003108" y3="1.423191" z3="-3.74376734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77682089" y3="-0.3140991" z3="-4.0661455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44902888" y3="-2.70276259" z3="-5.20113198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06660185" y3="-2.837612" z3="-6.07246725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84488085" y3="-1.12153407" z3="-5.72913815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.32682217" y3="-1.83765838" z3="5.04651521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31757469" y3="-3.68514934" z3="3.95554875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24044501" y3="-3.60408802" z3="-5.98468264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44193766" y3="-2.6133953" z3="-4.50727721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08147053" y3="1.15782754" z3="-1.49847405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12871747" y3="1.54656099" z3="-2.48476321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45567825" y3="1.46317413" z3="-1.6979661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87841317" y3="2.10374038" z3="-2.83674705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17570007" y3="1.16606712" z3="-0.92911305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.93903447" y3="2.32687451" z3="-2.98247733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.6019614" y3="2.1902088" z3="-3.66215444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.93847528" y3="2.46016961" z3="-3.83342472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88680479" y3="2.4607678" z3="-4.4424504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2796807" y3="2.94829025" z3="-4.75069062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.44525849" y3="3.1678391" z3="-3.38715076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.33833709" y3="3.5799204" z3="-4.18656385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.26625266" y3="4.17934813" z3="-2.81270047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.03732828" y3="5.51069561" z3="-3.06712253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.08840879" y3="3.89231159" z3="-2.15524354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.68470812" y3="6.26672321" z3="-2.61336149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.1355043" y3="4.9640359" z3="-4.44299355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.9696915" y3="5.91223545" z3="-3.90458228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.29060651" y3="5.26104686" z3="-5.07206611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.80321572" y3="6.97405566" z3="-4.10686617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48725481" y3="-2.23183071" z3="-0.28480734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44858061" y3="-3.01378168" z3="-1.06168811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01588819" y3="-2.62892367" z3="0.59643397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10649126" y3="-1.41116081" z3="-0.69453104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18809022" y3="-1.43254998" z3="-1.11858242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33331264" y3="-0.38992306" z3="-1.45725162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11179406" y3="-1.5495174" z3="-0.91022193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41887089" y3="-2.08053267" z3="-1.9769943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3321,.0858,-.1903;7.3786,.1796,.421;6.6445,.4565,-.3418;4.7408,1.2533,-2.2758;4.3872,.4716,-1.1879;2.7417,.8651,-3.6766;3.6561,1.7651,-3.1613;1.419,2.6096,-4.6651;1.5812,1.2713,-4.3993;.5453,2.9459,-5.232;2.9215,-.4637,-3.436;3.092,.0995,-1.0032;2.3902,-1.0533,-1.9888;.919,-.9136,-1.8212;3.0878,-2.3781,-1.816;-.1498,-3.6338,.6878;.004,-5.195,-4.75;-.2293,-4.9538,-3.7094;-.8394,-4.3064,-1.0823;.7887,-4.5405,-2.8517;-1.544,-5.0699,-3.254;-1.85,-4.7414,-1.9357;.4958,-4.2313,-1.5218;1.8204,-4.4399,-3.1965;-2.3372,-5.3877,-3.9342;-2.8856,-4.8023,-1.5932;-1.0357,-3.8777,.2439;-2.1791,-3.6764,.8872;-3.0631,-4.1397,.4471;-2.1774,-3.5558,2.3557;-2.2409,-3.3977,5.155;-3.3721,-3.7803,3.0553;-1.0144,-3.2581,3.0816;-1.0434,-3.1792,4.4709;-3.4028,-3.7038,4.445;-4.2841,-4.0246,2.5034;-.0559,-3.1079,2.5798;-.117,-2.9654,5.0118;-4.3398,-3.8902,4.9772;-2.2635,-3.344,6.247;1.4089,-3.8631,-.6119;2.1652,-3.3474,-1.0576;.5312,.2703,-4.7218;-3.0938,-1.7482,.0455;-2.9291,-1.008,1.2158;-1.8748,-.3503,1.5604;-.4039,.5274,1.257;-.5078,1.4594,-.3499;.9532,-.7273,1.389;-.3674,1.6885,2.7269;-3.9068,-1.0171,2.1108;-3.6885,-.4148,3.3768;-.254,.7912,-1.1911;.2474,2.2674,-.33;-1.4992,1.9223,-.4999;.9981,-1.1075,2.4224;1.9183,-.2529,1.1454;.827,-1.558,.6778;-.4066,1.1276,3.6776;.5686,2.2762,2.722;-1.2104,2.4019,2.7079;-2.824,-.8678,3.8874;-4.6036,-.6042,3.9535;-3.5282,.6701,3.2687;4.8234,-.6601,.996;4.4221,-1.996,.8704;3.7703,-2.6399,1.915;3.5361,-1.9345,3.0915;3.9869,-.6304,3.2736;4.6388,-.0001,2.2183;4.5478,-2.5051,-.0865;3.3939,-3.6573,1.8013;2.675,-2.5363,4.1148;3.7841,-.1108,4.2107;4.9618,1.0393,2.3233;-.7778,.4981,-4.2789;-1.7642,-.4648,-4.4406;-1.4303,-1.6583,-5.0739;-.1523,-1.8963,-5.5668;.8277,-.931,-5.381;-1.01,1.4232,-3.7438;-2.7768,-.3141,-4.0661;-2.449,-2.7028,-5.2011;.0666,-2.8376,-6.0725;1.8449,-1.1215,-5.7291;2.3268,-1.8377,5.0465;2.3176,-3.6851,3.9555;-2.2404,-3.6041,-5.9847;-3.4419,-2.6134,-4.5073;7.0815,1.1578,-1.4985;6.1287,1.5466,-2.4848;8.4557,1.4632,-1.698;8.8784,2.1037,-2.8367;9.1757,1.1661,-.9291;9.939,2.3269,-2.9825;6.602,2.1902,-3.6622;7.9385,2.4602,-3.8334;5.8868,2.4608,-4.4425;8.2797,2.9483,-4.7507;3.4453,3.1678,-3.3872;2.3383,3.5799,-4.1866;4.2663,4.1793,-2.8127;4.0373,5.5107,-3.0671;5.0884,3.8923,-2.1552;4.6847,6.2667,-2.6134;2.1355,4.964,-4.443;2.9697,5.9122,-3.9046;1.2906,5.261,-5.0721;2.8032,6.9741,-4.1069;-4.4873,-2.2318,-.2848;-4.4486,-3.0138,-1.0617;-5.0159,-2.6289,.5964;-5.1065,-1.4112,-.6945;-2.1881,-1.4325,-1.1186;-2.3333,-.3899,-1.4573;-1.1118,-1.5495,-.9102;-2.4189,-2.0805,-1.977;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650371567988</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005057007542 0.000459032343 0.019253830265 0.005335195470</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030494836 -0.000973311 0.000146045 0.000221816 0.000278939 0.000353854 0.000385867 0.000436585 0.000598933 0.000749961 0.000911815 0.001082940 0.001174593 0.001234218 0.001296879 0.001367444 0.001562935 0.001718474 0.001752036 0.001867359 0.002009911 0.002381169 0.002473236 0.002597956 0.002782142 0.003059225 0.003191252 0.003355496 0.003787485 0.003827261 0.004219578 0.004614862 0.004795463 0.004896725 0.005772514 0.005919793 0.006037731 0.006330662 0.006687502 0.007431887 0.007775539 0.008046797 0.008958879 0.009209531 0.009656365 0.010409799 0.010743129 0.011341263 0.011680846 0.011888526 0.012677638 0.013048897 0.013806430 0.013978785 0.014699331 0.015152342 0.015441105 0.015563440 0.015858267 0.016583392 0.017208094 0.017324587 0.018634604 0.018746106 0.019443764 0.020348897 0.021127002 0.021186324 0.022265560 0.023036761 0.024743343 0.025671776 0.026232805 0.026493030 0.026982676 0.028659770 0.029127221 0.030952185 0.031905095 0.032128226 0.033415942 0.033981970 0.035527088 0.036040006 0.038114277 0.038914494 0.040182395 0.040379851 0.041311698 0.044283012 0.045063399 0.045386502 0.046815116 0.049097348 0.050094872 0.050567813 0.050808742 0.051141678 0.052422586 0.052461945 0.052761647 0.052847380 0.054142164 0.054549674 0.055238543 0.055819424 0.056384181 0.056460407 0.056890219 0.058169806 0.059751503 0.060452469 0.061315168 0.061606746 0.062667994 0.063157005 0.064807572 0.065018574 0.066214651 0.067410826 0.068205775 0.069674057 0.072418899 0.073853322 0.074160905 0.075957393 0.077341507 0.083201476 0.084577991 0.086389926 0.086805848 0.087363716 0.089975435 0.090394076 0.092755592 0.094533399 0.095083856 0.096208953 0.096875815 0.097570695 0.098618428 0.099410868 0.100060535 0.101865174 0.102223766 0.102714753 0.103137016 0.103822790 0.103923021 0.106499737 0.106721532 0.107157648 0.108814695 0.109849877 0.111486800 0.112077094 0.112866131 0.114466771 0.115989156 0.118743724 0.120264130 0.121148687 0.121835966 0.123463525 0.125114115 0.126102772 0.126771775 0.131410457 0.134647853 0.135386215 0.142295460 0.143196466 0.146705726 0.146983725 0.149444872 0.151560469 0.154340569 0.155451344 0.156466009 0.160346362 0.161468615 0.173081482 0.173619460 0.178155347 0.183749667 0.184628087 0.188864745 0.189856658 0.192944784 0.193689245 0.197899774 0.199624620 0.204726074 0.206725975 0.206863114 0.209649511 0.210960614 0.214691599 0.216475011 0.217288782 0.220265681 0.224638052 0.226088136 0.231617354 0.234616866 0.235173009 0.235505503 0.244324702 0.255564840 0.256837204 0.262450817 0.268974740 0.279035639 0.282763718 0.286117996 0.290621342 0.295258765 0.304061070 0.305422032 0.306761807 0.312661145 0.315569738 0.316424274 0.321825705 0.328736937 0.331075710 0.349458240 0.351496487 0.353680469 0.355100623 0.359644655 0.361958766 0.362291157 0.380926409 0.385136838 0.391011078 0.410029847 0.424954771 0.429292651 0.451070332 0.468098639 0.470969237 0.475773585 0.481956345 0.486234139 0.489614273 0.507857937 0.513450917 0.534659341 0.565778029 0.572459285 0.590775083 0.592854364 0.605726293 0.606835510 0.641626090 0.645634932 0.646823358 0.673857680 0.676470641 0.684394540 0.691301558 0.692353715 0.699030814 0.703943546 0.716309266 0.741008605 0.751079090 0.757770880 0.762881270 0.772144735 0.778568023 0.810180328 0.812241732 0.814190201 0.820880596 0.821485792 0.825951797 0.831045199 0.835100788 0.835819267 0.844937077 0.845334444 0.847731772 0.857773742 0.864369368 0.864776018 0.872830515 0.880213315 0.883905245 0.889070704 0.891717149 0.900345301 0.903225527 0.920081036 0.923097961 0.932408778 0.934579948 0.964437951 0.975590851 0.985151181 1.000509831 1.015931725 1.026327329 1.040929508 1.049212211 1.056998097 1.067523850 1.086085887 1.088237158 1.103170702 1.105522485 1.112128587 1.119110454 1.123201726 1.135057174 1.140335806 1.170676458 1.173692327 1.180095183 1.185279526 1.188181795 1.194313828 1.223335496 1.224788383 1.271539884 1.299660618 1.318050081 1.327576842 1.331305564 1.332880791 1.335321986 1.338490532 1.342288923 1.344792085 1.358176550 1.375051766 1.382388777 1.383615830 1.400011708 1.419367378 1.427396724 1.551251567 1.660567796 1.773967774</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">136</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33401926" y3="0.08139395" z3="-0.18995408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38083002" y3="0.17772398" z3="0.4205531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64575036" y3="0.4538499" z3="-0.34172966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73955983" y3="1.25147944" z3="-2.27297706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38794068" y3="0.46673441" z3="-1.18658577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.74066089" y3="0.86365865" z3="-3.67366658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.65356227" y3="1.76385682" z3="-3.15641618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.41519789" y3="2.60867738" z3="-4.65794458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57965854" y3="1.26995552" z3="-4.39560044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.54098" y3="2.9448342" z3="-5.22417288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92239872" y3="-0.46548547" z3="-3.43612678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09335184" y3="0.09169216" z3="-1.00201741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39242049" y3="-1.05956932" z3="-1.99024087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92117321" y3="-0.92195764" z3="-1.82135248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09065893" y3="-2.3845819" z3="-1.82149421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15035779" y3="-3.63096562" z3="0.68443203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00183856" y3="-5.20458154" z3="-4.74953528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.233785" y3="-4.96168532" z3="-3.70904431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84129248" y3="-4.30845243" z3="-1.08288043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78503844" y3="-4.54723373" z3="-2.85315149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54861974" y3="-5.0747968" z3="-3.25248032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85337168" y3="-4.74305836" z3="-1.93465083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49330241" y3="-4.23497365" z3="-1.52371938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81617465" y3="-4.44723616" z3="-3.19936412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34310235" y3="-5.3920377" z3="-3.93161453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88966321" y3="-4.79952861" z3="-1.59134318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03620069" y3="-3.87657802" z3="0.24253091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1785772" y3="-3.67354049" z3="0.88697586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06388165" y3="-4.1368197" z3="0.44869789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17516188" y3="-3.54974347" z3="2.355015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23399106" y3="-3.38788161" z3="5.15428172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36896123" y3="-3.77213171" z3="3.0568595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0108265" y3="-3.25185431" z3="3.07872491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03747551" y3="-3.17118598" z3="4.46799136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39736174" y3="-3.69357838" z3="4.44649172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28161095" y3="-4.01690579" z3="2.50690344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.05283617" y3="-3.10360757" z3="2.57502013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.11009496" y3="-2.95805582" z3="5.00732133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33329566" y3="-3.87884982" z3="4.98051364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25431271" y3="-3.33340227" z3="6.24635469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40549937" y3="-3.8640275" z3="-0.61567473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16444514" y3="-3.35222342" z3="-1.06296826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53163326" y3="0.26895521" z3="-4.72081038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09274269" y3="-1.74562297" z3="0.0420829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92716487" y3="-1.00378162" z3="1.21094022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.87356393" y3="-0.3460181" z3="1.55476157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.4008332" y3="0.53278092" z3="1.25341201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.50041777" y3="1.45919165" z3="-0.35689783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.95873165" y3="-0.71925856" z3="1.39302243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37238911" y3="1.69691035" z3="2.71986135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90505036" y3="-1.01105374" z3="2.10528928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.68602069" y3="-0.40685011" z3="3.37036553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.24705662" y3="0.78830858" z3="-1.19560354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.25612793" y3="2.26545799" z3="-0.33886365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.49033747" y3="1.92459387" z3="-0.50917958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00367294" y3="-1.09703391" z3="2.42788582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92735714" y3="-0.2484773" z3="1.14809544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.82800554" y3="-1.55326802" z3="0.68315461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41435836" y3="1.13847741" z3="3.67181621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56367207" y3="2.28479948" z3="2.71667089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21575936" y3="2.40983232" z3="2.6956881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.82076015" y3="-0.8595136" z3="3.88076746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60069422" y3="-0.59537682" z3="3.9480164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.52540135" y3="0.67813091" z3="3.26065957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82639108" y3="-0.66568443" z3="0.99590373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42143221" y3="-2.00031428" z3="0.8679717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76942606" y3="-2.64480757" z3="1.91205207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53888104" y3="-1.94131098" z3="3.09060549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99350177" y3="-0.63881702" z3="3.27487448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64540145" y3="-0.00790702" z3="2.21994789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54457493" y3="-2.50770475" z3="-0.09017525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39021004" y3="-3.66101141" z3="1.79656305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67832578" y3="-2.54356914" z3="4.11403641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.79337857" y3="-0.12077282" z3="4.21348335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.97127873" y3="1.03047008" z3="2.32673345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78043327" y3="0.49439257" z3="-4.28209732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76554792" y3="-0.47114218" z3="-4.4492166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42980938" y3="-1.66444478" z3="-5.07428406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14885512" y3="-1.90010724" z3="-5.56722106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82999126" y3="-0.93229469" z3="-5.37661147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01551846" y3="1.41979032" z3="-3.75114106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77972769" y3="-0.32135691" z3="-4.07747288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4476552" y3="-2.70898593" z3="-5.20706664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07232828" y3="-2.84139181" z3="-6.06898099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84703924" y3="-1.12322921" z3="-5.72239582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33135183" y3="-1.84555456" z3="5.0467101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32015284" y3="-3.69190604" z3="3.95416855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23687956" y3="-3.61002773" z3="-5.99068832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44207788" y3="-2.62113785" z3="-4.51371807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.08082705" y3="1.15703822" z3="-1.49785967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12684524" y3="1.54690148" z3="-2.48244549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45435862" y3="1.46427809" z3="-1.69811559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87531894" y3="2.10851165" z3="-2.83576107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17531451" y3="1.16607342" z3="-0.9306851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.93550983" y3="2.33354415" z3="-2.98200437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59818057" y3="2.19440804" z3="-3.65865953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.93420527" y3="2.46681825" z3="-3.83053267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88199365" y3="2.46677726" z3="-4.43727487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.27407301" y3="2.95823046" z3="-4.74677869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.44033581" y3="3.16669287" z3="-3.37861077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.33273676" y3="3.57905635" z3="-4.17685937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.25970613" y3="4.17781275" z3="-2.80171271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.02831587" y3="5.50938721" z3="-3.05246617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.08249067" y3="3.89025307" z3="-2.14527017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.67486165" y3="6.26480594" z3="-2.59737242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.12728483" y3="4.96340164" z3="-4.42944594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.95971491" y3="5.9115565" z3="-3.88839413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.28171823" y3="5.26057398" z3="-5.05755606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.79108007" y3="6.9735888" z3="-4.08761234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48708673" y3="-2.22919921" z3="-0.2864202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45007467" y3="-3.01389846" z3="-1.06139074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.016254" y3="-2.62349437" z3="0.5961624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10562476" y3="-1.40925284" z3="-0.69810148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18714728" y3="-1.43305175" z3="-1.12286727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32997407" y3="-0.39090067" z3="-1.46222958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11032031" y3="-1.55355306" z3="-0.91607389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42154167" y3="-2.08137814" z3="-1.98077831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.334,.0814,-.19;7.3808,.1777,.4206;6.6458,.4538,-.3417;4.7396,1.2515,-2.273;4.3879,.4667,-1.1866;2.7407,.8637,-3.6737;3.6536,1.7639,-3.1564;1.4152,2.6087,-4.6579;1.5797,1.27,-4.3956;.541,2.9448,-5.2242;2.9224,-.4655,-3.4361;3.0934,.0917,-1.002;2.3924,-1.0596,-1.9902;.9212,-.922,-1.8214;3.0907,-2.3846,-1.8215;-.1504,-3.631,.6844;-.0018,-5.2046,-4.7495;-.2338,-4.9617,-3.709;-.8413,-4.3085,-1.0829;.785,-4.5472,-2.8532;-1.5486,-5.0748,-3.2525;-1.8534,-4.7431,-1.9347;.4933,-4.235,-1.5237;1.8162,-4.4472,-3.1994;-2.3431,-5.392,-3.9316;-2.8897,-4.7995,-1.5913;-1.0362,-3.8766,.2425;-2.1786,-3.6735,.887;-3.0639,-4.1368,.4487;-2.1752,-3.5497,2.355;-2.234,-3.3879,5.1543;-3.369,-3.7721,3.0569;-1.0108,-3.2519,3.0787;-1.0375,-3.1712,4.468;-3.3974,-3.6936,4.4465;-4.2816,-4.0169,2.5069;-.0528,-3.1036,2.575;-.1101,-2.9581,5.0073;-4.3333,-3.8788,4.9805;-2.2543,-3.3334,6.2464;1.4055,-3.864,-.6157;2.1644,-3.3522,-1.063;.5316,.269,-4.7208;-3.0927,-1.7456,.0421;-2.9272,-1.0038,1.2109;-1.8736,-.346,1.5548;-.4008,.5328,1.2534;-.5004,1.4592,-.3569;.9587,-.7193,1.393;-.3724,1.6969,2.7199;-3.9051,-1.0111,2.1053;-3.686,-.4069,3.3704;-.2471,.7883,-1.1956;.2561,2.2655,-.3389;-1.4903,1.9246,-.5092;1.0037,-1.097,2.4279;1.9274,-.2485,1.1481;.828,-1.5533,.6832;-.4144,1.1385,3.6718;.5637,2.2848,2.7167;-1.2158,2.4098,2.6957;-2.8208,-.8595,3.8808;-4.6007,-.5954,3.948;-3.5254,.6781,3.2607;4.8264,-.6657,.9959;4.4214,-2.0003,.868;3.7694,-2.6448,1.9121;3.5389,-1.9413,3.0906;3.9935,-.6388,3.2749;4.6454,-.0079,2.2199;4.5446,-2.5077,-.0902;3.3902,-3.661,1.7966;2.6783,-2.5436,4.114;3.7934,-.1208,4.2135;4.9713,1.0305,2.3267;-.7804,.4944,-4.2821;-1.7655,-.4711,-4.4492;-1.4298,-1.6644,-5.0743;-.1489,-1.9001,-5.5672;.83,-.9323,-5.3766;-1.0155,1.4198,-3.7511;-2.7797,-.3214,-4.0775;-2.4477,-2.709,-5.2071;.0723,-2.8414,-6.069;1.847,-1.1232,-5.7224;2.3314,-1.8456,5.0467;2.3202,-3.6919,3.9542;-2.2369,-3.61,-5.9907;-3.4421,-2.6211,-4.5137;7.0808,1.157,-1.4979;6.1268,1.5469,-2.4824;8.4544,1.4643,-1.6981;8.8753,2.1085,-2.8358;9.1753,1.1661,-.9307;9.9355,2.3335,-2.982;6.5982,2.1944,-3.6587;7.9342,2.4668,-3.8305;5.882,2.4668,-4.4373;8.2741,2.9582,-4.7468;3.4403,3.1667,-3.3786;2.3327,3.5791,-4.1769;4.2597,4.1778,-2.8017;4.0283,5.5094,-3.0525;5.0825,3.8903,-2.1453;4.6749,6.2648,-2.5974;2.1273,4.9634,-4.4294;2.9597,5.9116,-3.8884;1.2817,5.2606,-5.0576;2.7911,6.9736,-4.0876;-4.4871,-2.2292,-.2864;-4.4501,-3.0139,-1.0614;-5.0163,-2.6235,.5962;-5.1056,-1.4093,-.6981;-2.1871,-1.4331,-1.1229;-2.33,-.3909,-1.4622;-1.1103,-1.5536,-.9161;-2.4215,-2.0814,-1.9808;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650384542447</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005073467348 0.000468493738 0.019116316925 0.005334963192</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030496170 -0.000980823 -0.000097800 0.000164792 0.000279774 0.000357937 0.000389044 0.000438104 0.000596274 0.000743110 0.000908339 0.001081982 0.001183073 0.001233750 0.001294478 0.001371009 0.001525178 0.001703126 0.001752546 0.001863651 0.002025547 0.002396858 0.002508119 0.002595836 0.002747846 0.003048789 0.003206473 0.003346361 0.003782361 0.003856520 0.004254509 0.004622067 0.004808268 0.004891354 0.005770184 0.005896258 0.006037948 0.006337082 0.006687224 0.007432497 0.007728131 0.008047915 0.008969059 0.009212856 0.009658938 0.010364094 0.010747572 0.011356249 0.011666211 0.011796346 0.012676673 0.013039131 0.013806041 0.013953563 0.014701613 0.015155479 0.015427663 0.015564701 0.015852638 0.016576779 0.017209492 0.017324381 0.018620898 0.018749423 0.019462173 0.020348876 0.021127891 0.021177215 0.022268300 0.023037799 0.024746191 0.025681968 0.026231150 0.026494561 0.026972389 0.028666035 0.029126909 0.030954419 0.031946814 0.032128322 0.033425383 0.033997901 0.035523775 0.036064853 0.038131821 0.038917236 0.040238349 0.040393672 0.041322870 0.044292835 0.045062812 0.045492529 0.046817402 0.049097482 0.050125454 0.050580744 0.050814438 0.051142265 0.052422501 0.052462303 0.052762404 0.052855435 0.054150193 0.054547690 0.055238651 0.055829016 0.056385241 0.056458079 0.056890421 0.058160644 0.059751429 0.060451203 0.061315416 0.061605946 0.062685294 0.063157770 0.064818907 0.065023114 0.066212494 0.067438027 0.068227456 0.069766812 0.072419433 0.073870639 0.074194316 0.075971857 0.077344674 0.083200673 0.084588569 0.086421475 0.086810855 0.087361213 0.089996653 0.090404874 0.092755273 0.094533479 0.095102077 0.096210197 0.096872025 0.097570591 0.098636031 0.099411393 0.100059828 0.101861897 0.102232534 0.102723929 0.103141284 0.103821546 0.103898018 0.106507009 0.106754213 0.107164444 0.108823733 0.109851751 0.111490385 0.112087886 0.112864903 0.114465721 0.115988819 0.118749869 0.120280353 0.121154658 0.121860117 0.123463633 0.125119440 0.126106309 0.126780689 0.131413652 0.134648876 0.135382717 0.142291092 0.143199918 0.146732706 0.146979536 0.149447386 0.151656482 0.154323276 0.155444715 0.156465596 0.160435255 0.161496125 0.173083202 0.173619372 0.178165896 0.183755208 0.184662687 0.188866512 0.189867843 0.192951207 0.193688102 0.197904250 0.199623687 0.204743615 0.206724311 0.206860797 0.209649440 0.210970739 0.214742020 0.216478866 0.217313106 0.220275144 0.224637956 0.226104718 0.231630800 0.234623696 0.235200917 0.235506367 0.244329379 0.255566651 0.256838279 0.262455991 0.269082540 0.279041738 0.282762431 0.286118301 0.290736805 0.295300154 0.304083897 0.305422202 0.306765350 0.312694484 0.315704541 0.316424872 0.321825498 0.328804146 0.331200528 0.349472025 0.351494229 0.353748863 0.355100833 0.359652428 0.361979323 0.362296115 0.381377143 0.385247770 0.391017620 0.410027775 0.424954305 0.429288617 0.451073564 0.468123326 0.470994641 0.475773606 0.481938357 0.486259013 0.489614657 0.507894625 0.513461216 0.534657510 0.565778896 0.572477259 0.590815022 0.592864047 0.605727473 0.606877655 0.641630482 0.645638841 0.646948677 0.673865985 0.676491930 0.684394144 0.691305194 0.692415335 0.699030448 0.703943650 0.716323428 0.741009531 0.751081817 0.757788084 0.762947709 0.772144848 0.778569565 0.810202252 0.812247710 0.814194453 0.820897307 0.821488782 0.825953984 0.831043961 0.835108194 0.835850594 0.844947882 0.845386622 0.847783999 0.857775843 0.864376854 0.864776122 0.872839715 0.880258504 0.883933086 0.889071031 0.891715076 0.900347673 0.903246822 0.920073893 0.923098409 0.932422899 0.934583686 0.964440044 0.975590896 0.985151936 1.000511943 1.015942955 1.026330983 1.040932973 1.049215825 1.057005506 1.067537937 1.086087414 1.088238974 1.103175713 1.105536438 1.112129478 1.119132065 1.123202023 1.135057249 1.140339410 1.170679503 1.173699730 1.180099573 1.185284066 1.188189735 1.194313747 1.223359601 1.224860633 1.271536252 1.299666238 1.318074641 1.327582323 1.331314037 1.332880334 1.335314301 1.338509033 1.342289236 1.344792760 1.358161167 1.375050343 1.382385951 1.383627341 1.401742386 1.419369281 1.428420913 1.551251717 1.660564220 1.774021585</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">137</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33466173" y3="0.07613273" z3="-0.18972915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.381621" y3="0.17451765" z3="0.41958103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64584811" y3="0.45121381" z3="-0.34164641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73733147" y3="1.24887674" z3="-2.27057126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38763788" y3="0.46172811" z3="-1.18539253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73800272" y3="0.86040332" z3="-3.67121137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64983995" y3="1.76095207" z3="-3.15243841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40987627" y3="2.60542361" z3="-4.65151646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57623999" y3="1.26608237" z3="-4.39256529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.53537311" y3="2.94174964" z3="-5.2171304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.921546" y3="-0.46876159" z3="-3.43550648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09377677" y3="0.08521907" z3="-1.00084088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39260118" y3="-1.06478163" z3="-1.99008377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92136471" y3="-0.92736052" z3="-1.82032137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09094631" y3="-2.38989299" z3="-1.823135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14816049" y3="-3.62806146" z3="0.68021324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00531118" y3="-5.21458286" z3="-4.75006702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23690582" y3="-4.96778992" z3="-3.71036479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84223449" y3="-4.30712296" z3="-1.08537671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7835275" y3="-4.55524048" z3="-2.85519425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55160935" y3="-5.07659808" z3="-3.25322394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85525862" y3="-4.74105962" z3="-1.93610302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49307298" y3="-4.23970965" z3="-1.52628712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81594522" y3="-4.46110861" z3="-3.20129645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34641422" y3="-5.39430313" z3="-3.93121504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89037849" y3="-4.79648551" z3="-1.59267417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03537416" y3="-3.87247933" z3="0.23937307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17711199" y3="-3.66846021" z3="0.88478689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06241442" y3="-4.13268086" z3="0.44806347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17185571" y3="-3.54361513" z3="2.35286709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22764026" y3="-3.37980614" z3="5.1520894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36517081" y3="-3.76441895" z3="3.05611321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00624914" y3="-3.24668156" z3="3.07525388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03153781" y3="-3.16474835" z3="4.46444952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39195145" y3="-3.68508917" z3="4.44574705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27918571" y3="-4.00791532" z3="2.50714724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0488413" y3="-3.09955073" z3="2.57047445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10377613" y3="-2.95159111" z3="5.00277683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32772079" y3="-3.86884667" z3="4.98092258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24705088" y3="-3.32421034" z3="6.2440451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40915538" y3="-3.87328044" z3="-0.61838576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16531828" y3="-3.35965718" z3="-1.06536003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52914001" y3="0.26382328" z3="-4.7200901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09198897" y3="-1.74192569" z3="0.0378483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92446927" y3="-0.99876489" z3="1.20570187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86817329" y3="-0.34274107" z3="1.5467817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3977699" y3="0.53777139" z3="1.24899316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.49225191" y3="1.45973392" z3="-0.36414066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96099989" y3="-0.71520561" z3="1.39696573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37484157" y3="1.70811157" z3="2.71179092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.90123019" y3="-1.00336715" z3="2.1016552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67993375" y3="-0.39898816" z3="3.36609023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.24242962" y3="0.78412416" z3="-1.20040834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.2696863" y3="2.26197067" z3="-0.34937321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.47986506" y3="1.92924402" z3="-0.51810274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00307213" y3="-1.08951598" z3="2.43323511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.92786934" y3="-0.24356872" z3="1.15319738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83506995" y3="-1.55062199" z3="0.69064721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42436702" y3="1.15277271" z3="3.66544121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56120639" y3="2.29556791" z3="2.71291623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21734315" y3="2.42180802" z3="2.67957749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81671342" y3="-0.85492029" z3="3.8769537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59563867" y3="-0.58366973" z3="3.94327867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51526196" y3="0.68561214" z3="3.25607097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82853109" y3="-0.67207236" z3="0.99606869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42092103" y3="-2.00569696" z3="0.86710361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76930764" y3="-2.65017128" z3="1.91141721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54130908" y3="-1.94762919" z3="3.09087312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99886094" y3="-0.64642404" z3="3.27618543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65085895" y3="-0.01562281" z3="2.22129863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54112316" y3="-2.51193846" z3="-0.09217344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38827692" y3="-3.6654887" z3="1.79549214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68087184" y3="-2.54965597" z3="4.11445948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.80095102" y3="-0.12915702" z3="4.21560919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.97886633" y3="1.02190457" z3="2.32892968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78273324" y3="0.49015056" z3="-4.28419762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76739189" y3="-0.47387753" z3="-4.44993081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42862313" y3="-1.66775743" z3="-5.07984745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14766028" y3="-1.90447303" z3="-5.56606073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83017932" y3="-0.93767962" z3="-5.37741804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01934322" y3="1.41554426" z3="-3.7517347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78248406" y3="-0.32415063" z3="-4.08133169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44556495" y3="-2.71351554" z3="-5.20960355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07499537" y3="-2.8462896" z3="-6.06895595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84883364" y3="-1.12737543" z3="-5.72032696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33445272" y3="-1.85155928" z3="5.04735008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32213421" y3="-3.69783286" z3="3.9544731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2327429" y3="-3.61487077" z3="-5.99185085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44122315" y3="-2.62548548" z3="-4.51943463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0793492" y3="1.15765672" z3="-1.49667949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12413737" y3="1.54761021" z3="-2.48009102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45237532" y3="1.46753647" z3="-1.69702038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.87161302" y3="2.113883" z3="-2.83377401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17424702" y3="1.16876948" z3="-0.93063966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.93129977" y3="2.34042788" z3="-2.98020326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59376317" y3="2.19770664" z3="-3.65533111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92920522" y3="2.47215703" z3="-3.8274159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87666739" y3="2.469796" z3="-4.43329887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26763519" y3="2.96484094" z3="-4.74311818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.43424517" y3="3.16400863" z3="-3.37099875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.32558167" y3="3.57648229" z3="-4.16770816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.25182175" y3="4.17519318" z3="-2.79121363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.01756513" y3="5.50716765" z3="-3.03756663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.07528193" y3="3.88743689" z3="-2.135721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.66193518" y3="6.26327695" z3="-2.5792567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.11763552" y3="4.96114913" z3="-4.41633842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.94814601" y3="5.90940653" z3="-3.8723763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.27162766" y3="5.25851998" z3="-5.04368076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.77767025" y3="6.97155169" z3="-4.06849602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48642243" y3="-2.22543484" z3="-0.288562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44970743" y3="-3.01117703" z3="-1.06191249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01480542" y3="-2.61799048" z3="0.5951187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10486535" y3="-1.40584266" z3="-0.70119392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18706306" y3="-1.43135732" z3="-1.12802505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32728145" y3="-0.38826058" z3="-1.46717878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11098092" y3="-1.55332633" z3="-0.92162658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42301957" y3="-2.07905613" z3="-1.98542181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3347,.0761,-.1897;7.3816,.1745,.4196;6.6458,.4512,-.3416;4.7373,1.2489,-2.2706;4.3876,.4617,-1.1854;2.738,.8604,-3.6712;3.6498,1.761,-3.1524;1.4099,2.6054,-4.6515;1.5762,1.2661,-4.3926;.5354,2.9417,-5.2171;2.9215,-.4688,-3.4355;3.0938,.0852,-1.0008;2.3926,-1.0648,-1.9901;.9214,-.9274,-1.8203;3.0909,-2.3899,-1.8231;-.1482,-3.6281,.6802;-.0053,-5.2146,-4.7501;-.2369,-4.9678,-3.7104;-.8422,-4.3071,-1.0854;.7835,-4.5552,-2.8552;-1.5516,-5.0766,-3.2532;-1.8553,-4.7411,-1.9361;.4931,-4.2397,-1.5263;1.8159,-4.4611,-3.2013;-2.3464,-5.3943,-3.9312;-2.8904,-4.7965,-1.5927;-1.0354,-3.8725,.2394;-2.1771,-3.6685,.8848;-3.0624,-4.1327,.4481;-2.1719,-3.5436,2.3529;-2.2276,-3.3798,5.1521;-3.3652,-3.7644,3.0561;-1.0062,-3.2467,3.0753;-1.0315,-3.1647,4.4644;-3.392,-3.6851,4.4457;-4.2792,-4.0079,2.5071;-.0488,-3.0996,2.5705;-.1038,-2.9516,5.0028;-4.3277,-3.8688,4.9809;-2.2471,-3.3242,6.244;1.4092,-3.8733,-.6184;2.1653,-3.3597,-1.0654;.5291,.2638,-4.7201;-3.092,-1.7419,.0378;-2.9245,-.9988,1.2057;-1.8682,-.3427,1.5468;-.3978,.5378,1.249;-.4923,1.4597,-.3641;.961,-.7152,1.397;-.3748,1.7081,2.7118;-3.9012,-1.0034,2.1017;-3.6799,-.399,3.3661;-.2424,.7841,-1.2004;.2697,2.262,-.3494;-1.4799,1.9292,-.5181;1.0031,-1.0895,2.4332;1.9279,-.2436,1.1532;.8351,-1.5506,.6906;-.4244,1.1528,3.6654;.5612,2.2956,2.7129;-1.2173,2.4218,2.6796;-2.8167,-.8549,3.877;-4.5956,-.5837,3.9433;-3.5153,.6856,3.2561;4.8285,-.6721,.9961;4.4209,-2.0057,.8671;3.7693,-2.6502,1.9114;3.5413,-1.9476,3.0909;3.9989,-.6464,3.2762;4.6509,-.0156,2.2213;4.5411,-2.5119,-.0922;3.3883,-3.6655,1.7955;2.6809,-2.5497,4.1145;3.801,-.1292,4.2156;4.9789,1.0219,2.3289;-.7827,.4902,-4.2842;-1.7674,-.4739,-4.4499;-1.4286,-1.6678,-5.0798;-.1477,-1.9045,-5.5661;.8302,-.9377,-5.3774;-1.0193,1.4155,-3.7517;-2.7825,-.3242,-4.0813;-2.4456,-2.7135,-5.2096;.075,-2.8463,-6.069;1.8488,-1.1274,-5.7203;2.3345,-1.8516,5.0474;2.3221,-3.6978,3.9545;-2.2327,-3.6149,-5.9919;-3.4412,-2.6255,-4.5194;7.0793,1.1577,-1.4967;6.1241,1.5476,-2.4801;8.4524,1.4675,-1.697;8.8716,2.1139,-2.8338;9.1742,1.1688,-.9306;9.9313,2.3404,-2.9802;6.5938,2.1977,-3.6553;7.9292,2.4722,-3.8274;5.8767,2.4698,-4.4333;8.2676,2.9648,-4.7431;3.4342,3.164,-3.371;2.3256,3.5765,-4.1677;4.2518,4.1752,-2.7912;4.0176,5.5072,-3.0376;5.0753,3.8874,-2.1357;4.6619,6.2633,-2.5793;2.1176,4.9611,-4.4163;2.9481,5.9094,-3.8724;1.2716,5.2585,-5.0437;2.7777,6.9716,-4.0685;-4.4864,-2.2254,-.2886;-4.4497,-3.0112,-1.0619;-5.0148,-2.618,.5951;-5.1049,-1.4058,-.7012;-2.1871,-1.4314,-1.128;-2.3273,-.3883,-1.4672;-1.111,-1.5533,-.9216;-2.423,-2.0791,-1.9854;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650394863120</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004987084015 0.000468810042 0.014828379570 0.005340545969</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030496759 -0.001052392 -0.000075594 0.000162415 0.000279919 0.000342247 0.000388863 0.000438597 0.000597192 0.000764073 0.000906190 0.001083156 0.001182937 0.001240561 0.001301410 0.001380036 0.001536178 0.001706073 0.001754529 0.001853640 0.002046072 0.002411524 0.002526688 0.002597081 0.002732359 0.003051974 0.003222171 0.003357124 0.003781449 0.003867810 0.004275313 0.004620964 0.004797334 0.004879003 0.005771261 0.005890395 0.006060772 0.006371000 0.006688154 0.007432770 0.007726553 0.008048528 0.008965687 0.009230171 0.009660726 0.010352070 0.010756754 0.011363741 0.011639379 0.011784477 0.012675713 0.013020042 0.013809355 0.013958554 0.014702581 0.015156426 0.015429371 0.015560858 0.015860409 0.016579243 0.017208853 0.017325321 0.018619902 0.018751113 0.019474154 0.020346701 0.021129246 0.021170099 0.022261914 0.023038885 0.024752448 0.025670903 0.026237878 0.026495144 0.026981453 0.028661304 0.029143467 0.030954873 0.032001699 0.032135426 0.033426977 0.034014557 0.035523267 0.036077075 0.038134416 0.038924808 0.040261360 0.040397965 0.041328184 0.044293725 0.045070628 0.045554165 0.046819068 0.049097890 0.050145514 0.050592778 0.050839109 0.051143632 0.052422833 0.052463552 0.052764781 0.052861767 0.054157706 0.054548735 0.055239081 0.055848043 0.056387368 0.056458400 0.056890820 0.058172649 0.059751984 0.060452938 0.061323679 0.061607020 0.062704489 0.063164179 0.064851275 0.065049470 0.066214071 0.067444678 0.068271964 0.069823164 0.072420270 0.073898793 0.074224003 0.075981637 0.077350422 0.083203236 0.084603934 0.086423486 0.086813167 0.087361110 0.090014718 0.090417659 0.092756687 0.094533300 0.095113281 0.096215142 0.096887197 0.097571746 0.098643981 0.099411686 0.100061454 0.101889211 0.102237790 0.102738351 0.103139478 0.103820974 0.103899055 0.106512211 0.106783301 0.107175619 0.108830912 0.109851164 0.111493063 0.112103819 0.112865650 0.114487057 0.115993188 0.118754403 0.120301147 0.121155446 0.121881954 0.123465074 0.125121007 0.126109348 0.126783436 0.131414580 0.134648506 0.135382593 0.142289428 0.143201735 0.146754021 0.146983340 0.149458208 0.151701048 0.154343230 0.155488428 0.156466936 0.160477109 0.161522324 0.173088845 0.173621981 0.178184523 0.183763222 0.184695852 0.188866449 0.189869476 0.192956063 0.193699140 0.197905397 0.199624927 0.204749323 0.206728475 0.206876588 0.209649456 0.210980340 0.214797375 0.216491745 0.217329846 0.220280798 0.224638393 0.226116184 0.231644624 0.234623083 0.235234402 0.235510286 0.244333046 0.255569281 0.256842018 0.262467616 0.269180090 0.279046527 0.282762803 0.286120054 0.290854037 0.295359428 0.304113915 0.305423737 0.306765945 0.312740204 0.315874655 0.316425054 0.321825563 0.328869211 0.331367155 0.349486166 0.351495062 0.353896360 0.355106228 0.359654817 0.361999112 0.362311805 0.381863033 0.385307207 0.391026857 0.410036918 0.424955950 0.429291626 0.451083190 0.468143435 0.471043108 0.475774734 0.481978094 0.486289114 0.489621199 0.507984684 0.513473504 0.534665194 0.565781375 0.572483467 0.590879347 0.592882840 0.605729720 0.606904699 0.641693946 0.645648402 0.647102100 0.673879097 0.676520722 0.684394683 0.691305871 0.692447530 0.699034539 0.703944381 0.716334527 0.741009595 0.751088283 0.757853058 0.763149700 0.772145543 0.778574837 0.810238663 0.812256297 0.814226632 0.820902446 0.821493745 0.825954580 0.831044194 0.835147397 0.835897159 0.844952180 0.845451397 0.847834549 0.857778101 0.864382663 0.864776299 0.872847980 0.880316044 0.883976000 0.889073945 0.891716862 0.900354314 0.903311313 0.920097286 0.923101125 0.932424133 0.934585568 0.964446316 0.975591070 0.985156097 1.000515099 1.015984671 1.026343345 1.040936941 1.049227352 1.057015597 1.067560984 1.086088857 1.088259387 1.103186368 1.105555917 1.112130528 1.119187028 1.123202827 1.135057900 1.140360455 1.170684526 1.173702936 1.180118218 1.185306945 1.188206209 1.194313802 1.223450729 1.225003833 1.271543334 1.299679494 1.318111983 1.327582963 1.331314125 1.332894882 1.335315703 1.338535412 1.342291167 1.344795017 1.358166710 1.375050331 1.382391042 1.383629963 1.403571021 1.419373429 1.429632097 1.551254356 1.660565125 1.774141502</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">138</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33471844" y3="0.0726904" z3="-0.18790004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38143319" y3="0.1752066" z3="0.42178319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64505611" y3="0.45040856" z3="-0.33953775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73497175" y3="1.24564609" z3="-2.26775122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38684298" y3="0.45700636" z3="-1.18326275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73623686" y3="0.8557096" z3="-3.6682635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64649455" y3="1.75712151" z3="-3.14858287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40550927" y3="2.59979055" z3="-4.64699794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57408549" y3="1.26074361" z3="-4.38895516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.53052173" y3="2.93497654" z3="-5.2127132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92188795" y3="-0.47352995" z3="-3.43418901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09359297" y3="0.07785257" z3="-0.99882649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39389133" y3="-1.07205908" z3="-1.98929163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92255671" y3="-0.93655369" z3="-1.81876375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09396712" y3="-2.3965231" z3="-1.82433527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14765468" y3="-3.62319997" z3="0.67450025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00595966" y3="-5.22363618" z3="-4.7509586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23682958" y3="-4.97490803" z3="-3.71164377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84197238" y3="-4.30632989" z3="-1.08889085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78423434" y3="-4.56448654" z3="-2.85624653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55287986" y3="-5.07636831" z3="-3.25605507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85646767" y3="-4.73654533" z3="-1.94004302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49353793" y3="-4.24468559" z3="-1.52844717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81608041" y3="-4.47292213" z3="-3.20169984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34959803" y3="-5.3899434" z3="-3.93473049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89399096" y3="-4.78220142" z3="-1.59788072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03473465" y3="-3.86811734" z3="0.23465874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17577018" y3="-3.66338299" z3="0.8808758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06197679" y3="-4.12717325" z3="0.44506569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16942403" y3="-3.53817904" z3="2.3488844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22334274" y3="-3.37508109" z3="5.14811814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36263256" y3="-3.75718023" z3="3.05287188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00314141" y3="-3.24319015" z3="3.07050979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02732489" y3="-3.16195078" z3="4.45977968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38869612" y3="-3.67795453" z3="4.4424363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27665047" y3="-4.00000924" z3="2.50456562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04554956" y3="-3.09804908" z3="2.5651728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09833592" y3="-2.95187959" z3="4.99795941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32422915" y3="-3.86068301" z3="4.97810254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24162292" y3="-3.32020193" z3="6.24016131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40719189" y3="-3.87706821" z3="-0.62079121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16745443" y3="-3.36707241" z3="-1.06819408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52843651" y3="0.2585747" z3="-4.71747281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09067855" y3="-1.73618483" z3="0.03532786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91995682" y3="-0.99314644" z3="1.20271868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86295725" y3="-0.33849937" z3="1.54187213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.39118646" y3="0.54152771" z3="1.24551177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.48156545" y3="1.45913154" z3="-0.3699091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96725241" y3="-0.70916414" z3="1.4004909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37365684" y3="1.7152138" z3="2.70511453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8951879" y3="-0.99603808" z3="2.1001786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67016088" y3="-0.39124201" z3="3.36397599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23834623" y3="0.78104129" z3="-1.2059837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.28443517" y3="2.25610578" z3="-0.35698386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.46609574" y3="1.93616472" z3="-0.52265706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00746559" y3="-1.08015829" z3="2.43775996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93575605" y3="-0.24010471" z3="1.15618733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83971505" y3="-1.54678985" z3="0.69544622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42487468" y3="1.16348064" z3="3.66039227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56262583" y3="2.30241405" z3="2.70663917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21594484" y3="2.42846139" z3="2.66887072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80517213" y3="-0.84571846" z3="3.8724863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58367644" y3="-0.57596318" z3="3.94504154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50663288" y3="0.6927097" z3="3.25235468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82974862" y3="-0.67679133" z3="0.99753273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4208067" y3="-2.01005206" z3="0.86752873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76951465" y3="-2.65497934" z3="1.91174219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54333284" y3="-1.9532246" z3="3.09222102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00261981" y3="-0.6526405" z3="3.27865069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65409752" y3="-0.02141976" z3="2.22370637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53997623" y3="-2.51569968" z3="-0.09207163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3874251" y3="-3.67000378" z3="1.79507442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68305624" y3="-2.55518773" z3="4.11589498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.80619528" y3="-0.13604069" z3="4.21889889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.98323019" y3="1.01576626" z3="2.33207065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78532799" y3="0.48490359" z3="-4.28492177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76987971" y3="-0.48042372" z3="-4.45652281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43139353" y3="-1.67426514" z3="-5.07940376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14837478" y3="-1.91115862" z3="-5.56590074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82971603" y3="-0.94327631" z3="-5.37064518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02272256" y3="1.4107525" z3="-3.75548249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78551477" y3="-0.32951169" z3="-4.08944274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44875587" y3="-2.71866587" z3="-5.21663551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07492171" y3="-2.85318391" z3="-6.06594373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84850642" y3="-1.1341721" z3="-5.71179133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33575126" y3="-1.85639564" z3="5.04802608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32535816" y3="-3.70378315" z3="3.95683957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23545401" y3="-3.61904716" z3="-6.00037118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44516295" y3="-2.63111639" z3="-4.52641745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07697107" y3="1.15837778" z3="-1.49398858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12093081" y3="1.54679328" z3="-2.4772136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44919414" y3="1.47291797" z3="-1.69346847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86691608" y3="2.12269321" z3="-2.82915165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1718737" y3="1.17647702" z3="-0.92685824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92609582" y3="2.35395994" z3="-2.97453504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58897483" y3="2.19948029" z3="-3.65174624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92381713" y3="2.47880536" z3="-3.8229367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87123727" y3="2.47017716" z3="-4.42961364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26124204" y3="2.97436524" z3="-4.73783395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42794224" y3="3.16023435" z3="-3.3646024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31901849" y3="3.57175412" z3="-4.16139915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.24299046" y3="4.17201964" z3="-2.78252364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.00611049" y3="5.50376349" z3="-3.02680621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06681363" y3="3.88463225" z3="-2.12728996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.64927817" y3="6.25959411" z3="-2.56772864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.10794944" y3="4.95656657" z3="-4.40737657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.93614966" y3="5.90548001" z3="-3.86124831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.26145806" y3="5.25328358" z3="-5.03447131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.76284187" y3="6.96793845" z3="-4.05494807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4867411" y3="-2.21778903" z3="-0.28840937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45315047" y3="-3.00380168" z3="-1.06212557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0139355" y3="-2.60971429" z3="0.59616705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.1053068" y3="-1.39748392" z3="-0.69975012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18802017" y3="-1.42641225" z3="-1.13251868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32762644" y3="-0.38338793" z3="-1.47052611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1110593" y3="-1.55143555" z3="-0.92946213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42804766" y3="-2.07290872" z3="-1.99016561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3347,.0727,-.1879;7.3814,.1752,.4218;6.6451,.4504,-.3395;4.735,1.2456,-2.2678;4.3868,.457,-1.1833;2.7362,.8557,-3.6683;3.6465,1.7571,-3.1486;1.4055,2.5998,-4.647;1.5741,1.2607,-4.389;.5305,2.935,-5.2127;2.9219,-.4735,-3.4342;3.0936,.0779,-.9988;2.3939,-1.0721,-1.9893;.9226,-.9366,-1.8188;3.094,-2.3965,-1.8243;-.1477,-3.6232,.6745;-.006,-5.2236,-4.751;-.2368,-4.9749,-3.7116;-.842,-4.3063,-1.0889;.7842,-4.5645,-2.8562;-1.5529,-5.0764,-3.2561;-1.8565,-4.7365,-1.94;.4935,-4.2447,-1.5284;1.8161,-4.4729,-3.2017;-2.3496,-5.3899,-3.9347;-2.894,-4.7822,-1.5979;-1.0347,-3.8681,.2347;-2.1758,-3.6634,.8809;-3.062,-4.1272,.4451;-2.1694,-3.5382,2.3489;-2.2233,-3.3751,5.1481;-3.3626,-3.7572,3.0529;-1.0031,-3.2432,3.0705;-1.0273,-3.162,4.4598;-3.3887,-3.678,4.4424;-4.2767,-4,2.5046;-.0455,-3.098,2.5652;-.0983,-2.9519,4.998;-4.3242,-3.8607,4.9781;-2.2416,-3.3202,6.2402;1.4072,-3.8771,-.6208;2.1675,-3.3671,-1.0682;.5284,.2586,-4.7175;-3.0907,-1.7362,.0353;-2.92,-.9931,1.2027;-1.863,-.3385,1.5419;-.3912,.5415,1.2455;-.4816,1.4591,-.3699;.9673,-.7092,1.4005;-.3737,1.7152,2.7051;-3.8952,-.996,2.1002;-3.6702,-.3912,3.364;-.2383,.781,-1.206;.2844,2.2561,-.357;-1.4661,1.9362,-.5227;1.0075,-1.0802,2.4378;1.9358,-.2401,1.1562;.8397,-1.5468,.6954;-.4249,1.1635,3.6604;.5626,2.3024,2.7066;-1.2159,2.4285,2.6689;-2.8052,-.8457,3.8725;-4.5837,-.576,3.945;-3.5066,.6927,3.2524;4.8297,-.6768,.9975;4.4208,-2.0101,.8675;3.7695,-2.655,1.9117;3.5433,-1.9532,3.0922;4.0026,-.6526,3.2787;4.6541,-.0214,2.2237;4.54,-2.5157,-.0921;3.3874,-3.67,1.7951;2.6831,-2.5552,4.1159;3.8062,-.136,4.2189;4.9832,1.0158,2.3321;-.7853,.4849,-4.2849;-1.7699,-.4804,-4.4565;-1.4314,-1.6743,-5.0794;-.1484,-1.9112,-5.5659;.8297,-.9433,-5.3706;-1.0227,1.4108,-3.7555;-2.7855,-.3295,-4.0894;-2.4488,-2.7187,-5.2166;.0749,-2.8532,-6.0659;1.8485,-1.1342,-5.7118;2.3358,-1.8564,5.048;2.3254,-3.7038,3.9568;-2.2355,-3.619,-6.0004;-3.4452,-2.6311,-4.5264;7.077,1.1584,-1.494;6.1209,1.5468,-2.4772;8.4492,1.4729,-1.6935;8.8669,2.1227,-2.8292;9.1719,1.1765,-.9269;9.9261,2.354,-2.9745;6.589,2.1995,-3.6517;7.9238,2.4788,-3.8229;5.8712,2.4702,-4.4296;8.2612,2.9744,-4.7378;3.4279,3.1602,-3.3646;2.319,3.5718,-4.1614;4.243,4.172,-2.7825;4.0061,5.5038,-3.0268;5.0668,3.8846,-2.1273;4.6493,6.2596,-2.5677;2.1079,4.9566,-4.4074;2.9361,5.9055,-3.8612;1.2615,5.2533,-5.0345;2.7628,6.9679,-4.0549;-4.4867,-2.2178,-.2884;-4.4532,-3.0038,-1.0621;-5.0139,-2.6097,.5962;-5.1053,-1.3975,-.6998;-2.188,-1.4264,-1.1325;-2.3276,-.3834,-1.4705;-1.1111,-1.5514,-.9295;-2.428,-2.0729,-1.9902;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650399134573</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004854049122 0.000473544629 0.017728411390 0.005336085806</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030497059 -0.000930779 -0.000048399 0.000175223 0.000282366 0.000351060 0.000393457 0.000441619 0.000597196 0.000765772 0.000906212 0.001082142 0.001186071 0.001240635 0.001303011 0.001379865 0.001550286 0.001706034 0.001755177 0.001855560 0.002046190 0.002416603 0.002527165 0.002605370 0.002731953 0.003054821 0.003226638 0.003361807 0.003783871 0.003867877 0.004275139 0.004628552 0.004800516 0.004880037 0.005771715 0.005890519 0.006064687 0.006391185 0.006692227 0.007433307 0.007728643 0.008048540 0.008966298 0.009238459 0.009665917 0.010354797 0.010757226 0.011362929 0.011639230 0.011784623 0.012676505 0.013020021 0.013811500 0.013959306 0.014707278 0.015156261 0.015429331 0.015560882 0.015866877 0.016578877 0.017210242 0.017328804 0.018622320 0.018755047 0.019485751 0.020347291 0.021128893 0.021174478 0.022262022 0.023038648 0.024757555 0.025670454 0.026247635 0.026499528 0.026984063 0.028665028 0.029166192 0.030954749 0.032043698 0.032191125 0.033434051 0.034038274 0.035525594 0.036087903 0.038136226 0.038927950 0.040270098 0.040397500 0.041330581 0.044293678 0.045078226 0.045568318 0.046819839 0.049098090 0.050151439 0.050607198 0.050861059 0.051145383 0.052422979 0.052464297 0.052767735 0.052863887 0.054160734 0.054550355 0.055240440 0.055858085 0.056389032 0.056458738 0.056891950 0.058177323 0.059753510 0.060453089 0.061328733 0.061607292 0.062725394 0.063180721 0.064873326 0.065085471 0.066214667 0.067450422 0.068295722 0.069848483 0.072420480 0.073900689 0.074225136 0.075985257 0.077357710 0.083205879 0.084612549 0.086425139 0.086814106 0.087361396 0.090021322 0.090418298 0.092767382 0.094533254 0.095118531 0.096219457 0.096891097 0.097577742 0.098645221 0.099411665 0.100066719 0.101936407 0.102237384 0.102755634 0.103140301 0.103824095 0.103905748 0.106516989 0.106819085 0.107190531 0.108842335 0.109851709 0.111493073 0.112117180 0.112867118 0.114505754 0.115996233 0.118756800 0.120324755 0.121155403 0.121895790 0.123468155 0.125120919 0.126111901 0.126787858 0.131416091 0.134648040 0.135382894 0.142288924 0.143201824 0.146761285 0.146983254 0.149469143 0.151719989 0.154349863 0.155490135 0.156469916 0.160516233 0.161545177 0.173094189 0.173628108 0.178212570 0.183773565 0.184712030 0.188867673 0.189869204 0.192960278 0.193715264 0.197905917 0.199625294 0.204755423 0.206729616 0.206882718 0.209649527 0.210981955 0.214825676 0.216494800 0.217352903 0.220285448 0.224641630 0.226121381 0.231654944 0.234622980 0.235261926 0.235512782 0.244335891 0.255571607 0.256845907 0.262472808 0.269253647 0.279051063 0.282763373 0.286121928 0.290921948 0.295438994 0.304114248 0.305424863 0.306767281 0.312740431 0.315975884 0.316427467 0.321825624 0.328938695 0.331495433 0.349497297 0.351495758 0.354007711 0.355110498 0.359654886 0.362021969 0.362326095 0.382254582 0.385326934 0.391034742 0.410042227 0.424957504 0.429291878 0.451102728 0.468164622 0.471130172 0.475775936 0.481998615 0.486322374 0.489622534 0.508030610 0.513488448 0.534665646 0.565782127 0.572486327 0.590923919 0.592901483 0.605730501 0.606904118 0.641763362 0.645649329 0.647177497 0.673888309 0.676552554 0.684395762 0.691305881 0.692453834 0.699036619 0.703944619 0.716348430 0.741009594 0.751088348 0.757853092 0.763311047 0.772148039 0.778576740 0.810252624 0.812263899 0.814282711 0.820902392 0.821495612 0.825960433 0.831044656 0.835150580 0.835961661 0.844953478 0.845515999 0.847843944 0.857782043 0.864383224 0.864776327 0.872849357 0.880332592 0.884006437 0.889074162 0.891718575 0.900354226 0.903316946 0.920104217 0.923103571 0.932429971 0.934586017 0.964446624 0.975591156 0.985156106 1.000516310 1.015985268 1.026353261 1.040937190 1.049241860 1.057020505 1.067562093 1.086090377 1.088270925 1.103187008 1.105578063 1.112131177 1.119190128 1.123202841 1.135059695 1.140404896 1.170688428 1.173702914 1.180128394 1.185307291 1.188206579 1.194313860 1.223455919 1.225122364 1.271543756 1.299683885 1.318143168 1.327582951 1.331315171 1.332894806 1.335318953 1.338586867 1.342291418 1.344795091 1.358172109 1.375050574 1.382395932 1.383630524 1.404971004 1.419373441 1.430632910 1.551257982 1.660565274 1.774171457</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">139</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3360292" y3="0.06747524" z3="-0.18787769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3827028" y3="0.17373019" z3="0.42152337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64553467" y3="0.44855432" z3="-0.33914251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73311909" y3="1.24326224" z3="-2.26544186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3870917" y3="0.451229" z3="-1.18256592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73387428" y3="0.85250872" z3="-3.66587685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64298998" y3="1.75440568" z3="-3.14457616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39962742" y3="2.59676908" z3="-4.63935011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57036428" y3="1.25692171" z3="-4.38513861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52403925" y3="2.93233542" z3="-5.20365222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9220537" y3="-0.47702326" z3="-3.43490383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09465865" y3="0.06906219" z3="-0.99850505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39615448" y3="-1.07983611" z3="-1.99106638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92467738" y3="-0.94712132" z3="-1.81931139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09766517" y3="-2.40385585" z3="-1.82907977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14514684" y3="-3.6196402" z3="0.67268151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00558147" y3="-5.23168574" z3="-4.75002564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2372064" y3="-4.97832912" z3="-3.71184892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84180139" y3="-4.30214602" z3="-1.09039245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78482467" y3="-4.56986785" z3="-2.8567955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55353549" y3="-5.07492281" z3="-3.25624342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85683009" y3="-4.73138201" z3="-1.94106676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49471619" y3="-4.2467425" z3="-1.5296318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81897133" y3="-4.48627098" z3="-3.20162447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34925033" y3="-5.39029317" z3="-3.93380003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89274634" y3="-4.77752935" z3="-1.59924966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03327539" y3="-3.86284314" z3="0.23297525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17399353" y3="-3.65867701" z3="0.87969157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05981306" y3="-4.1229247" z3="0.44399001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16762601" y3="-3.53252332" z3="2.34751547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22165057" y3="-3.36682162" z3="5.14660796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36121741" y3="-3.74939692" z3="3.05145686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00083634" y3="-3.23873134" z3="3.06916384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02534805" y3="-3.15589659" z3="4.4583016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38719285" y3="-3.66898214" z3="4.44101004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2762359" y3="-3.99048729" z3="2.50305346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04329316" y3="-3.09504348" z3="2.56382337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09718986" y3="-2.94526732" z3="4.99647363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32325947" y3="-3.84950579" z3="4.97667566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24021594" y3="-3.3103942" z3="6.23852834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41307986" y3="-3.88472168" z3="-0.62173737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17050517" y3="-3.37391126" z3="-1.06919414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52545153" y3="0.2533574" z3="-4.71591961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09040887" y3="-1.73186139" z3="0.03231291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91777818" y3="-0.98762362" z3="1.19850277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85949781" y3="-0.33316407" z3="1.53502887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38729886" y3="0.5458846" z3="1.23962124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47261778" y3="1.45851118" z3="-0.37927282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96963629" y3="-0.70791729" z3="1.40065648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37253576" y3="1.72495598" z3="2.6954659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89169336" y3="-0.98896907" z3="2.09750415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66447855" y3="-0.38310391" z3="3.36018706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23153329" y3="0.77540034" z3="-1.21151255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30033267" y3="2.25085774" z3="-0.37071326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45426719" y3="1.93935898" z3="-0.53490506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00710258" y3="-1.07841701" z3="2.43865611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94003691" y3="-0.24115642" z3="1.15829697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84199598" y3="-1.54602629" z3="0.69631809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42850701" y3="1.17603057" z3="3.6523833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56443413" y3="2.31137689" z3="2.69865108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21406344" y3="2.43957928" z3="2.65334832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80024944" y3="-0.84058736" z3="3.86841372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5783931" y3="-0.56461274" z3="3.941017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49714643" y3="0.70091361" z3="3.24772959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83246287" y3="-0.68343262" z3="0.99712716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42014312" y3="-2.01541798" z3="0.86542985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76861477" y3="-2.66051918" z3="1.9093509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54542832" y3="-1.96016481" z3="3.09105929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00829769" y3="-0.66121939" z3="3.27907362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66030764" y3="-0.02984924" z3="2.22462149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53619966" y3="-2.51942203" z3="-0.0955763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38382399" y3="-3.6742875" z3="1.79145129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68521599" y3="-2.56171524" z3="4.11500822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81422438" y3="-0.1457494" z3="4.22023806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99219465" y3="1.00626753" z3="2.33435679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7889167" y3="0.47995427" z3="-4.28652986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77322886" y3="-0.48370513" z3="-4.45679124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43178721" y3="-1.67814938" z3="-5.08351045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14801448" y3="-1.915449" z3="-5.56306725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82925073" y3="-0.94888797" z3="-5.37105379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02790842" y3="1.4058981" z3="-3.75637703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79046884" y3="-0.33322274" z3="-4.09390293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44854971" y3="-2.72343748" z3="-5.21790202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07663489" y3="-2.85805633" z3="-6.06325379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84937021" y3="-1.13924229" z3="-5.70866511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33900467" y3="-1.86292587" z3="5.04754539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32660176" y3="-3.70987224" z3="3.95590791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23324298" y3="-3.62421157" z3="-6.0000246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4467119" y3="-2.63588355" z3="-4.5308707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07560761" y3="1.15974342" z3="-1.49245314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11856368" y3="1.54876756" z3="-2.47440376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44691055" y3="1.47638347" z3="-1.69207965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86281585" y3="2.12921409" z3="-2.8264802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17012422" y3="1.17815084" z3="-0.92684501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92115593" y3="2.36124048" z3="-2.97222632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58494091" y3="2.20582422" z3="-3.64730814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91886199" y3="2.4873722" z3="-3.81855933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86653648" y3="2.4780833" z3="-4.42391409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25481575" y3="2.98592367" z3="-4.73224806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42212875" y3="3.15749708" z3="-3.35741472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31170862" y3="3.56914443" z3="-4.15205552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23567057" y3="4.16933996" z3="-2.7733816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99554894" y3="5.50155001" z3="-3.01345935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06031302" y3="3.88204182" z3="-2.11917251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63675539" y3="6.25814131" z3="-2.55178696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09783942" y3="4.95408603" z3="-4.39446762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92424219" y3="5.90335271" z3="-3.84611474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25030021" y3="5.25085326" z3="-5.02006561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74912056" y3="6.96566192" z3="-4.03721966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48651514" y3="-2.21414406" z3="-0.28859885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45377869" y3="-3.00146021" z3="-1.06065361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01259667" y3="-2.6043156" z3="0.59764813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10508214" y3="-1.39452188" z3="-0.70075548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18838537" y3="-1.42447012" z3="-1.13661989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32651783" y3="-0.38096068" z3="-1.47544444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11175494" y3="-1.54956311" z3="-0.93395689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42956723" y3="-2.07183564" z3="-1.99279082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.336,.0675,-.1879;7.3827,.1737,.4215;6.6455,.4486,-.3391;4.7331,1.2433,-2.2654;4.3871,.4512,-1.1826;2.7339,.8525,-3.6659;3.643,1.7544,-3.1446;1.3996,2.5968,-4.6394;1.5704,1.2569,-4.3851;.524,2.9323,-5.2037;2.9221,-.477,-3.4349;3.0947,.0691,-.9985;2.3962,-1.0798,-1.9911;.9247,-.9471,-1.8193;3.0977,-2.4039,-1.8291;-.1451,-3.6196,.6727;-.0056,-5.2317,-4.75;-.2372,-4.9783,-3.7118;-.8418,-4.3021,-1.0904;.7848,-4.5699,-2.8568;-1.5535,-5.0749,-3.2562;-1.8568,-4.7314,-1.9411;.4947,-4.2467,-1.5296;1.819,-4.4863,-3.2016;-2.3493,-5.3903,-3.9338;-2.8927,-4.7775,-1.5992;-1.0333,-3.8628,.233;-2.174,-3.6587,.8797;-3.0598,-4.1229,.444;-2.1676,-3.5325,2.3475;-2.2217,-3.3668,5.1466;-3.3612,-3.7494,3.0515;-1.0008,-3.2387,3.0692;-1.0253,-3.1559,4.4583;-3.3872,-3.669,4.441;-4.2762,-3.9905,2.5031;-.0433,-3.095,2.5638;-.0972,-2.9453,4.9965;-4.3233,-3.8495,4.9767;-2.2402,-3.3104,6.2385;1.4131,-3.8847,-.6217;2.1705,-3.3739,-1.0692;.5255,.2534,-4.7159;-3.0904,-1.7319,.0323;-2.9178,-.9876,1.1985;-1.8595,-.3332,1.535;-.3873,.5459,1.2396;-.4726,1.4585,-.3793;.9696,-.7079,1.4007;-.3725,1.725,2.6955;-3.8917,-.989,2.0975;-3.6645,-.3831,3.3602;-.2315,.7754,-1.2115;.3003,2.2509,-.3707;-1.4543,1.9394,-.5349;1.0071,-1.0784,2.4387;1.94,-.2412,1.1583;.842,-1.546,.6963;-.4285,1.176,3.6524;.5644,2.3114,2.6987;-1.2141,2.4396,2.6533;-2.8002,-.8406,3.8684;-4.5784,-.5646,3.941;-3.4971,.7009,3.2477;4.8325,-.6834,.9971;4.4201,-2.0154,.8654;3.7686,-2.6605,1.9094;3.5454,-1.9602,3.0911;4.0083,-.6612,3.2791;4.6603,-.0298,2.2246;4.5362,-2.5194,-.0956;3.3838,-3.6743,1.7915;2.6852,-2.5617,4.115;3.8142,-.1457,4.2202;4.9922,1.0063,2.3344;-.7889,.48,-4.2865;-1.7732,-.4837,-4.4568;-1.4318,-1.6781,-5.0835;-.148,-1.9154,-5.5631;.8293,-.9489,-5.3711;-1.0279,1.4059,-3.7564;-2.7905,-.3332,-4.0939;-2.4485,-2.7234,-5.2179;.0766,-2.8581,-6.0633;1.8494,-1.1392,-5.7087;2.339,-1.8629,5.0475;2.3266,-3.7099,3.9559;-2.2332,-3.6242,-6;-3.4467,-2.6359,-4.5309;7.0756,1.1597,-1.4925;6.1186,1.5488,-2.4744;8.4469,1.4764,-1.6921;8.8628,2.1292,-2.8265;9.1701,1.1782,-.9268;9.9212,2.3612,-2.9722;6.5849,2.2058,-3.6473;7.9189,2.4874,-3.8186;5.8665,2.4781,-4.4239;8.2548,2.9859,-4.7322;3.4221,3.1575,-3.3574;2.3117,3.5691,-4.1521;4.2357,4.1693,-2.7734;3.9955,5.5016,-3.0135;5.0603,3.882,-2.1192;4.6368,6.2581,-2.5518;2.0978,4.9541,-4.3945;2.9242,5.9034,-3.8461;1.2503,5.2509,-5.0201;2.7491,6.9657,-4.0372;-4.4865,-2.2141,-.2886;-4.4538,-3.0015,-1.0607;-5.0126,-2.6043,.5976;-5.1051,-1.3945,-.7008;-2.1884,-1.4245,-1.1366;-2.3265,-.381,-1.4754;-1.1118,-1.5496,-.934;-2.4296,-2.0718,-1.9928;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650405768418</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004130240457 0.000443273122 0.021662149659 0.005335664225</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030497038 -0.000966421 -0.000032716 0.000176838 0.000282122 0.000351505 0.000392387 0.000441854 0.000600488 0.000764068 0.000906298 0.001082236 0.001188563 0.001240752 0.001303154 0.001381333 0.001579087 0.001706310 0.001755657 0.001856185 0.002046926 0.002421434 0.002526434 0.002609718 0.002736124 0.003054510 0.003234356 0.003362731 0.003783682 0.003868646 0.004280884 0.004641119 0.004801493 0.004882966 0.005772872 0.005890957 0.006073748 0.006409063 0.006706603 0.007440485 0.007739294 0.008049972 0.008969479 0.009246368 0.009668571 0.010358605 0.010759959 0.011365830 0.011639618 0.011785604 0.012676677 0.013022792 0.013813882 0.013959176 0.014710499 0.015156254 0.015430527 0.015562354 0.015868852 0.016578899 0.017211574 0.017332815 0.018630625 0.018758863 0.019491950 0.020347639 0.021128826 0.021175450 0.022262798 0.023039147 0.024762363 0.025669960 0.026269108 0.026506702 0.026989561 0.028666724 0.029192497 0.030955630 0.032057958 0.032314361 0.033444272 0.034075039 0.035527253 0.036098869 0.038135851 0.038927292 0.040270651 0.040402286 0.041330931 0.044293567 0.045090848 0.045567626 0.046819642 0.049098231 0.050150826 0.050612849 0.050869613 0.051146077 0.052423754 0.052464422 0.052769995 0.052864596 0.054161175 0.054556675 0.055241443 0.055868557 0.056390890 0.056459741 0.056893797 0.058179946 0.059757668 0.060453126 0.061332905 0.061607210 0.062742890 0.063213736 0.064881867 0.065120826 0.066217323 0.067455473 0.068310569 0.069864737 0.072420472 0.073903047 0.074228556 0.075987543 0.077367515 0.083214383 0.084617428 0.086425459 0.086813976 0.087361083 0.090023300 0.090418924 0.092774039 0.094533236 0.095120170 0.096224706 0.096893093 0.097594068 0.098646696 0.099411890 0.100078095 0.102009233 0.102242809 0.102771603 0.103144810 0.103836298 0.103918950 0.106524210 0.106850857 0.107211816 0.108854130 0.109856112 0.111493353 0.112124865 0.112869539 0.114530862 0.116004234 0.118758062 0.120346203 0.121155602 0.121905433 0.123472743 0.125120965 0.126113992 0.126787711 0.131420249 0.134647676 0.135383085 0.142288435 0.143211090 0.146760841 0.146985625 0.149477155 0.151743008 0.154352293 0.155495081 0.156476964 0.160557096 0.161569152 0.173101461 0.173635947 0.178236967 0.183782486 0.184722168 0.188867454 0.189871720 0.192964678 0.193726049 0.197906146 0.199625152 0.204769445 0.206732378 0.206894777 0.209649833 0.210981912 0.214844450 0.216502082 0.217386300 0.220287983 0.224650652 0.226123002 0.231662956 0.234623496 0.235282323 0.235518670 0.244338662 0.255571492 0.256851167 0.262479105 0.269321372 0.279056218 0.282765122 0.286123389 0.290982244 0.295516595 0.304114793 0.305425252 0.306779638 0.312740426 0.316056690 0.316432424 0.321825958 0.328995558 0.331618201 0.349505198 0.351499743 0.354112158 0.355113943 0.359656020 0.362055024 0.362342869 0.382578308 0.385329104 0.391039228 0.410045766 0.424958230 0.429294236 0.451138291 0.468175764 0.471275577 0.475776970 0.482013624 0.486362954 0.489622767 0.508094097 0.513506679 0.534666067 0.565783120 0.572486489 0.590957802 0.592917988 0.605730627 0.606912359 0.641844564 0.645649453 0.647228457 0.673888227 0.676581460 0.684398450 0.691306552 0.692453473 0.699039044 0.703944714 0.716358037 0.741009645 0.751088352 0.757853801 0.763471754 0.772152556 0.778580002 0.810253157 0.812281751 0.814385518 0.820913791 0.821495874 0.825984550 0.831044845 0.835155889 0.836011698 0.844953481 0.845552022 0.847843773 0.857784030 0.864384978 0.864776330 0.872849372 0.880341345 0.884034489 0.889074400 0.891721727 0.900354371 0.903332937 0.920107203 0.923105934 0.932440853 0.934590679 0.964446647 0.975591174 0.985156469 1.000516283 1.015986145 1.026358903 1.040937484 1.049250297 1.057020436 1.067562147 1.086091983 1.088276496 1.103187045 1.105602927 1.112131229 1.119190168 1.123203045 1.135062959 1.140481060 1.170692799 1.173703337 1.180136495 1.185307319 1.188208022 1.194313856 1.223457947 1.225250007 1.271546544 1.299690305 1.318151221 1.327586726 1.331315125 1.332899638 1.335319458 1.338680037 1.342293872 1.344795089 1.358190241 1.375051212 1.382426888 1.383631699 1.406057252 1.419373408 1.431577200 1.551263884 1.660565785 1.774187664</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">140</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33731608" y3="0.06165788" z3="-0.18965232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38382907" y3="0.16986188" z3="0.41941861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64614666" y3="0.44482858" z3="-0.34066273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73229117" y3="1.24008864" z3="-2.2650289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38779132" y3="0.44608298" z3="-1.18346848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73288494" y3="0.84970991" z3="-3.66492166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64095418" y3="1.75172568" z3="-3.14224215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39504598" y3="2.59423434" z3="-4.63291694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56819037" y3="1.25431407" z3="-4.38187306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51817329" y3="2.92949426" z3="-5.19563746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92305866" y3="-0.47993181" z3="-3.43667534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09594171" y3="0.06275781" z3="-0.99974398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39790179" y3="-1.08507306" z3="-1.99358642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92641033" y3="-0.95307077" z3="-1.82129301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10017407" y3="-2.40893548" z3="-1.83340974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14394056" y3="-3.61700186" z3="0.67288996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00487535" y3="-5.23605195" z3="-4.74773406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23514631" y3="-4.98376567" z3="-3.70915198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83869704" y3="-4.30559906" z3="-1.08831346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78717741" y3="-4.57574512" z3="-2.85423597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55173003" y3="-5.07822437" z3="-3.25390507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85448749" y3="-4.73353722" z3="-1.9389863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49711489" y3="-4.25098803" z3="-1.52748506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81912344" y3="-4.4889013" z3="-3.19936022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35006343" y3="-5.3894741" z3="-3.93213001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89278245" y3="-4.77256552" z3="-1.59758251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03109481" y3="-3.86268307" z3="0.2338173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17207247" y3="-3.6569344" z3="0.87972155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05818838" y3="-4.12132469" z3="0.44447612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16679535" y3="-3.52783552" z3="2.34731087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22365625" y3="-3.35610321" z3="5.14605813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36129239" y3="-3.74199263" z3="3.05060803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0005119" y3="-3.23393944" z3="3.06952042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0261795" y3="-3.14858632" z3="4.45853501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38884448" y3="-3.65835302" z3="4.43988263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27508578" y3="-3.98468268" z3="2.50203556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04176865" y3="-3.09339017" z3="2.56499729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09704231" y3="-2.94017736" z3="4.99742271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32542798" y3="-3.83708819" z3="4.97495067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24309739" y3="-3.29771036" z3="6.23790873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41211162" y3="-3.88429675" z3="-0.62095683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17283078" y3="-3.37805051" z3="-1.07055009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52424615" y3="0.25140287" z3="-4.71329477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08839506" y3="-1.73054511" z3="0.02965822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91387221" y3="-0.98436403" z3="1.19440149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85389056" y3="-0.33139278" z3="1.52894731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3821812" y3="0.54750338" z3="1.23191835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46578436" y3="1.45495964" z3="-0.38973543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97455113" y3="-0.70394028" z3="1.40029928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37060726" y3="1.7327381" z3="2.68281887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8874995" y3="-0.98219127" z3="2.09380291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6595457" y3="-0.37361255" z3="3.35503127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22802923" y3="0.76974588" z3="-1.22170413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3052637" y3="2.24653344" z3="-0.38214193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44698873" y3="1.93820959" z3="-0.54529524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00881338" y3="-1.07202149" z3="2.43906902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94368709" y3="-0.23565863" z3="1.15991669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85133246" y3="-1.54312456" z3="0.69732982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42558737" y3="1.18853193" z3="3.64222095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56422583" y3="2.32186397" z3="2.6839323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21390756" y3="2.44413437" z3="2.63717576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79559549" y3="-0.82908453" z3="3.86456363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57315798" y3="-0.5535805" z3="3.93723974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49311611" y3="0.70968379" z3="3.23967925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83477894" y3="-0.69070294" z3="0.99485409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41778915" y3="-2.02106412" z3="0.86117709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7661451" y3="-2.66615826" z3="1.90503358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54770494" y3="-1.96760019" z3="3.08883999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01607398" y3="-0.67089592" z3="3.27906266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66803261" y3="-0.03949621" z3="2.22452792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53007298" y3="-2.52333472" z3="-0.10114304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37761898" y3="-3.67832342" z3="1.785675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68660054" y3="-2.56803538" z3="4.11267175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82620233" y3="-0.15694946" z3="4.22209871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00388523" y3="0.99516497" z3="2.33606085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79078103" y3="0.47756095" z3="-4.28495903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77463337" y3="-0.48771984" z3="-4.45915874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43367523" y3="-1.6816908" z3="-5.08154872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14935501" y3="-1.91858046" z3="-5.56350489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82789411" y3="-0.95030717" z3="-5.36577909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03044256" y3="1.40328064" z3="-3.75610789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79153232" y3="-0.33664837" z3="-4.09561022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45030445" y3="-2.72634372" z3="-5.22073338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07585651" y3="-2.86086101" z3="-6.06278028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.847534" y3="-1.14111887" z3="-5.70362785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34484067" y3="-1.86991353" z3="5.04742285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32263115" y3="-3.71442805" z3="3.95113398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23396013" y3="-3.62707706" z3="-6.0031453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44913921" y3="-2.63826899" z3="-4.53449248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07485901" y3="1.15900304" z3="-1.49257526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11684377" y3="1.54783302" z3="-2.47376853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44578479" y3="1.48062197" z3="-1.69093694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86029583" y3="2.1378371" z3="-2.82342523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17006894" y3="1.18338057" z3="-0.92612328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91849659" y3="2.37490596" z3="-2.96782828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58156604" y3="2.20817435" z3="-3.6451319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91512924" y3="2.49468368" z3="-3.81505747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86234119" y3="2.47962532" z3="-4.4214182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24994155" y3="2.99620202" z3="-4.72740286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41688215" y3="3.15538919" z3="-3.3499782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3053727" y3="3.56714687" z3="-4.14294212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2283441" y3="4.16718382" z3="-2.76250933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98561384" y3="5.49936178" z3="-2.99819378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05417625" y3="3.87922295" z3="-2.11008904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62578549" y3="6.25529316" z3="-2.53470731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08833337" y3="4.95253397" z3="-4.38021195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91302665" y3="5.90157934" z3="-3.82896588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23985301" y3="5.24944576" z3="-5.00445172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73482414" y3="6.96453357" z3="-4.01555751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48536563" y3="-2.2118724" z3="-0.28966013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45401692" y3="-3.00037565" z3="-1.0608137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01125014" y3="-2.60060745" z3="0.59708288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10385292" y3="-1.39224211" z3="-0.70227606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1870339" y3="-1.42540719" z3="-1.14033185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32640375" y3="-0.38314128" z3="-1.48138509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1099983" y3="-1.55008388" z3="-0.93784809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42844057" y3="-2.07458269" z3="-1.99538309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3373,.0617,-.1897;7.3838,.1699,.4194;6.6461,.4448,-.3407;4.7323,1.2401,-2.265;4.3878,.4461,-1.1835;2.7329,.8497,-3.6649;3.641,1.7517,-3.1422;1.395,2.5942,-4.6329;1.5682,1.2543,-4.3819;.5182,2.9295,-5.1956;2.9231,-.4799,-3.4367;3.0959,.0628,-.9997;2.3979,-1.0851,-1.9936;.9264,-.9531,-1.8213;3.1002,-2.4089,-1.8334;-.1439,-3.617,.6729;-.0049,-5.2361,-4.7477;-.2351,-4.9838,-3.7092;-.8387,-4.3056,-1.0883;.7872,-4.5757,-2.8542;-1.5517,-5.0782,-3.2539;-1.8545,-4.7335,-1.939;.4971,-4.251,-1.5275;1.8191,-4.4889,-3.1994;-2.3501,-5.3895,-3.9321;-2.8928,-4.7726,-1.5976;-1.0311,-3.8627,.2338;-2.1721,-3.6569,.8797;-3.0582,-4.1213,.4445;-2.1668,-3.5278,2.3473;-2.2237,-3.3561,5.1461;-3.3613,-3.742,3.0506;-1.0005,-3.2339,3.0695;-1.0262,-3.1486,4.4585;-3.3888,-3.6584,4.4399;-4.2751,-3.9847,2.502;-.0418,-3.0934,2.565;-.097,-2.9402,4.9974;-4.3254,-3.8371,4.975;-2.2431,-3.2977,6.2379;1.4121,-3.8843,-.621;2.1728,-3.3781,-1.0706;.5242,.2514,-4.7133;-3.0884,-1.7305,.0297;-2.9139,-.9844,1.1944;-1.8539,-.3314,1.5289;-.3822,.5475,1.2319;-.4658,1.455,-.3897;.9746,-.7039,1.4003;-.3706,1.7327,2.6828;-3.8875,-.9822,2.0938;-3.6595,-.3736,3.355;-.228,.7697,-1.2217;.3053,2.2465,-.3821;-1.447,1.9382,-.5453;1.0088,-1.072,2.4391;1.9437,-.2357,1.1599;.8513,-1.5431,.6973;-.4256,1.1885,3.6422;.5642,2.3219,2.6839;-1.2139,2.4441,2.6372;-2.7956,-.8291,3.8646;-4.5732,-.5536,3.9372;-3.4931,.7097,3.2397;4.8348,-.6907,.9949;4.4178,-2.0211,.8612;3.7661,-2.6662,1.905;3.5477,-1.9676,3.0888;4.0161,-.6709,3.2791;4.668,-.0395,2.2245;4.5301,-2.5233,-.1011;3.3776,-3.6783,1.7857;2.6866,-2.568,4.1127;3.8262,-.1569,4.2221;5.0039,.9952,2.3361;-.7908,.4776,-4.285;-1.7746,-.4877,-4.4592;-1.4337,-1.6817,-5.0815;-.1494,-1.9186,-5.5635;.8279,-.9503,-5.3658;-1.0304,1.4033,-3.7561;-2.7915,-.3366,-4.0956;-2.4503,-2.7263,-5.2207;.0759,-2.8609,-6.0628;1.8475,-1.1411,-5.7036;2.3448,-1.8699,5.0474;2.3226,-3.7144,3.9511;-2.234,-3.6271,-6.0031;-3.4491,-2.6383,-4.5345;7.0749,1.159,-1.4926;6.1168,1.5478,-2.4738;8.4458,1.4806,-1.6909;8.8603,2.1378,-2.8234;9.1701,1.1834,-.9261;9.9185,2.3749,-2.9678;6.5816,2.2082,-3.6451;7.9151,2.4947,-3.8151;5.8623,2.4796,-4.4214;8.2499,2.9962,-4.7274;3.4169,3.1554,-3.35;2.3054,3.5671,-4.1429;4.2283,4.1672,-2.7625;3.9856,5.4994,-2.9982;5.0542,3.8792,-2.1101;4.6258,6.2553,-2.5347;2.0883,4.9525,-4.3802;2.913,5.9016,-3.829;1.2399,5.2494,-5.0045;2.7348,6.9645,-4.0156;-4.4854,-2.2119,-.2897;-4.454,-3.0004,-1.0608;-5.0113,-2.6006,.5971;-5.1039,-1.3922,-.7023;-2.187,-1.4254,-1.1403;-2.3264,-.3831,-1.4814;-1.11,-1.5501,-.9378;-2.4284,-2.0746,-1.9954;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411124587</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003541045076 0.000429760065 0.018821247904 0.005336480221</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030491740 -0.000897765 -0.000019599 0.000227229 0.000283952 0.000342934 0.000393238 0.000447012 0.000599615 0.000759073 0.000894987 0.001086469 0.001186019 0.001247944 0.001308639 0.001382654 0.001584741 0.001704732 0.001748105 0.001854304 0.002046522 0.002422414 0.002520393 0.002610749 0.002744677 0.003053775 0.003218633 0.003367414 0.003783290 0.003873900 0.004292888 0.004660404 0.004774123 0.004908162 0.005775453 0.005868337 0.006082555 0.006418100 0.006728340 0.007455181 0.007763787 0.008049734 0.008973131 0.009251174 0.009678683 0.010336959 0.010726105 0.011382281 0.011627498 0.011794463 0.012675135 0.013019864 0.013810977 0.013968661 0.014713165 0.015154720 0.015434957 0.015564614 0.015869641 0.016574424 0.017210161 0.017336227 0.018642810 0.018763623 0.019500579 0.020344926 0.021120457 0.021175639 0.022259388 0.023040137 0.024771715 0.025667293 0.026326112 0.026511910 0.026999304 0.028668097 0.029218613 0.030956757 0.032062643 0.032488378 0.033454614 0.034142932 0.035518421 0.036108386 0.038135056 0.038923356 0.040275527 0.040407766 0.041332709 0.044289390 0.045120375 0.045628557 0.046822711 0.049098342 0.050154643 0.050621973 0.050871547 0.051146943 0.052424576 0.052464868 0.052771556 0.052864422 0.054161367 0.054561787 0.055244722 0.055879611 0.056391615 0.056455909 0.056894644 0.058181356 0.059764051 0.060453517 0.061334467 0.061610660 0.062759336 0.063252834 0.064891181 0.065173867 0.066215165 0.067470894 0.068350348 0.069877947 0.072422751 0.073907015 0.074228109 0.075989820 0.077374031 0.083219287 0.084619916 0.086430770 0.086813826 0.087365170 0.090022837 0.090420629 0.092786129 0.094533327 0.095118892 0.096228958 0.096891206 0.097613443 0.098650624 0.099412948 0.100092573 0.102102631 0.102292572 0.102784714 0.103156383 0.103852233 0.103962096 0.106546142 0.106891154 0.107238620 0.108864669 0.109858746 0.111495406 0.112126759 0.112875977 0.114555247 0.116013507 0.118758990 0.120375202 0.121162427 0.121910152 0.123476035 0.125121626 0.126113492 0.126781864 0.131418712 0.134647662 0.135382281 0.142287606 0.143215328 0.146759285 0.146989078 0.149483570 0.151753001 0.154351072 0.155492114 0.156484275 0.160619547 0.161579080 0.173097451 0.173637728 0.178256416 0.183795449 0.184723979 0.188864907 0.189878761 0.192965702 0.193743663 0.197906653 0.199624760 0.204801382 0.206732972 0.206899370 0.209650596 0.210983538 0.214852730 0.216515377 0.217434029 0.220291328 0.224655765 0.226123127 0.231666221 0.234623211 0.235296938 0.235527198 0.244342841 0.255575959 0.256855497 0.262495675 0.269373478 0.279062810 0.282765190 0.286123930 0.291034100 0.295592101 0.304114461 0.305424963 0.306821920 0.312749226 0.316118894 0.316438863 0.321827217 0.329037068 0.331729706 0.349509477 0.351503167 0.354163421 0.355110902 0.359681463 0.362079937 0.362362746 0.382830706 0.385328796 0.391036392 0.410040566 0.424959609 0.429297301 0.451202029 0.468182234 0.471554977 0.475777762 0.482042448 0.486369161 0.489622139 0.508199301 0.513546546 0.534667668 0.565761918 0.572473350 0.590995535 0.592948088 0.605736474 0.606978900 0.642017865 0.645652044 0.647234058 0.673891151 0.676618804 0.684401774 0.691308167 0.692460096 0.699038651 0.703944970 0.716373515 0.741009799 0.751088851 0.757867738 0.763649128 0.772161548 0.778586725 0.810257086 0.812287723 0.814511150 0.820980659 0.821496351 0.826069580 0.831051483 0.835177500 0.836089216 0.844961575 0.845557198 0.847900192 0.857784224 0.864390306 0.864776644 0.872853070 0.880344584 0.884066391 0.889074593 0.891721708 0.900355139 0.903359762 0.920104818 0.923107092 0.932455573 0.934603169 0.964446719 0.975591470 0.985158146 1.000517951 1.015997799 1.026362807 1.040943589 1.049260342 1.057022071 1.067564102 1.086094316 1.088279793 1.103189479 1.105638027 1.112131189 1.119193761 1.123203245 1.135069876 1.140645944 1.170695770 1.173709029 1.180159431 1.185318821 1.188232580 1.194314039 1.223468468 1.225352507 1.271461906 1.299690206 1.318177133 1.327591994 1.331305046 1.332912520 1.335316852 1.338854511 1.342288661 1.344792212 1.358212393 1.375055466 1.382453675 1.383631873 1.406999009 1.419377836 1.432199515 1.551271092 1.660573697 1.774180183</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">141</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33912308" y3="0.05681509" z3="-0.19023748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38545252" y3="0.16976099" z3="0.41940733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64702902" y3="0.44410243" z3="-0.34026649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73102716" y3="1.23825643" z3="-2.26314327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38844317" y3="0.44043705" z3="-1.18349437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73120963" y3="0.84783457" z3="-3.66293968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63812164" y3="1.75001613" z3="-3.13844964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38950606" y3="2.59275268" z3="-4.62479348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56498542" y3="1.2521621" z3="-4.37786918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51207385" y3="2.92816536" z3="-5.18636979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92433899" y3="-0.48234635" z3="-3.43868204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09728111" y3="0.0535866" z3="-1.00024274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4000354" y3="-1.09232529" z3="-1.99714999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92844415" y3="-0.96196117" z3="-1.824288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10284448" y3="-2.4162047" z3="-1.84001958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14159413" y3="-3.61696696" z3="0.67429783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00701073" y3="-5.24134552" z3="-4.74623332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23757618" y3="-4.98585523" z3="-3.70835505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83905981" y3="-4.30381777" z3="-1.08752973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78578387" y3="-4.57877528" z3="-2.85427942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55391989" y3="-5.07840035" z3="-3.25200046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.855482" y3="-4.73226109" z3="-1.93717488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49724156" y3="-4.25262891" z3="-1.5275222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82031308" y3="-4.49885071" z3="-3.19960656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35030668" y3="-5.39339938" z3="-3.92862454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89097597" y3="-4.77585177" z3="-1.59480029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02974713" y3="-3.86086812" z3="0.23486717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17077196" y3="-3.65377084" z3="0.8803034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05678517" y3="-4.11819095" z3="0.44502782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16611347" y3="-3.52298185" z3="2.34768509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22466546" y3="-3.34634823" z3="5.14606488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36159264" y3="-3.73375743" z3="3.05030331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99983587" y3="-3.22993349" z3="3.0703062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02650206" y3="-3.14200845" z3="4.45914764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38994068" y3="-3.64762602" z3="4.43945344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27641763" y3="-3.97422451" z3="2.50109412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04117481" y3="-3.09102111" z3="2.56609708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09870558" y3="-2.93250509" z3="4.99817943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32770414" y3="-3.82281598" z3="4.97399246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24517572" y3="-3.28535806" z3="6.23773533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41786991" y3="-3.89110722" z3="-0.62122477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17574459" y3="-3.3844832" z3="-1.07171995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52197988" y3="0.24765528" z3="-4.71199719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08582455" y3="-1.72800066" z3="0.02733744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91070138" y3="-0.97966121" z3="1.19038649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85136278" y3="-0.32593465" z3="1.52350233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37834269" y3="0.55088829" z3="1.22495705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46065429" y3="1.45318261" z3="-0.39957825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97717951" y3="-0.70232643" z3="1.39822506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36638702" y3="1.74014995" z3="2.67229507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88386388" y3="-0.9754597" z3="2.09015006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65405112" y3="-0.36409567" z3="3.35000609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22341762" y3="0.76485037" z3="-1.22833828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31662922" y3="2.24157968" z3="-0.39587311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43997175" y3="1.93797574" z3="-0.55694017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00960562" y3="-1.06784697" z3="2.43791369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94991013" y3="-0.23862064" z3="1.15756241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85096682" y3="-1.54402551" z3="0.69730337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42144824" y3="1.19878365" z3="3.63338939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56972633" y3="2.32838456" z3="2.67105634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2092658" y3="2.45287081" z3="2.62437074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7894228" y3="-0.81969926" z3="3.85914633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56724967" y3="-0.54172782" z3="3.93358694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48589656" y3="0.71897068" z3="3.2321071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83776049" y3="-0.69762748" z3="0.99338549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4165633" y3="-2.02648826" z3="0.85729566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76393762" y3="-2.67189176" z3="1.90028885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54898591" y3="-1.97523357" z3="3.08572414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02207075" y3="-0.68056719" z3="3.27838048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67480857" y3="-0.04880471" z3="2.2246038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52586858" y3="-2.52691692" z3="-0.10632207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37172238" y3="-3.68250934" z3="1.77883198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68725902" y3="-2.57508703" z3="4.10937714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83508259" y3="-0.16812708" z3="4.22261443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01400316" y3="0.98458146" z3="2.33793874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79377983" y3="0.47303912" z3="-4.28580892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7770787" y3="-0.49131405" z3="-4.45942674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43353089" y3="-1.68538548" z3="-5.08424473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14830421" y3="-1.92141574" z3="-5.56156591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82783418" y3="-0.95414454" z3="-5.36680456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03468388" y3="1.39853139" z3="-3.75594737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79517259" y3="-0.3413146" z3="-4.09892436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44930657" y3="-2.73133596" z3="-5.22209439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07789745" y3="-2.86374575" z3="-6.06100762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84903227" y3="-1.14362708" z3="-5.70215933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34875782" y3="-1.87789831" z3="5.04595677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31996237" y3="-3.71992304" z3="3.94636319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23107057" y3="-3.63271961" z3="-6.00271716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44983924" y3="-2.64353901" z3="-4.53805315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07391359" y3="1.16157168" z3="-1.49076896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11504928" y3="1.55031833" z3="-2.4711185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44363846" y3="1.48569759" z3="-1.68877361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85634445" y3="2.14616204" z3="-2.81988671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16836692" y3="1.18797737" z3="-0.92470291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91348056" y3="2.38431848" z3="-2.96419229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57821927" y3="2.21484361" z3="-3.64095889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91070872" y3="2.50395261" z3="-3.81054427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85848922" y3="2.48655113" z3="-4.4165979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24424942" y3="3.00889832" z3="-4.72165556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41176612" y3="3.15336664" z3="-3.34275124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29865909" y3="3.56547516" z3="-4.13337574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22198517" y3="4.1646123" z3="-2.75347016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97578964" y3="5.49735989" z3="-2.9844928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04852901" y3="3.87662127" z3="-2.10197982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.614629" y3="6.25327757" z3="-2.51905232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07857288" y3="4.95108812" z3="-4.36654839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90162727" y3="5.90016018" z3="-3.8130371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22884619" y3="5.24837572" z3="-4.98896047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72155351" y3="6.96295845" z3="-3.99673626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48340637" y3="-2.20879028" z3="-0.2902055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45340122" y3="-2.99857245" z3="-1.06002922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00890177" y3="-2.59534428" z3="0.59792881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10142652" y3="-1.38935497" z3="-0.70379825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18488343" y3="-1.42590129" z3="-1.1437836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32405551" y3="-0.38414239" z3="-1.48714029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10777498" y3="-1.55010409" z3="-0.94139842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42663301" y3="-2.0770372" z3="-1.99720773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0568,-.1902;7.3855,.1698,.4194;6.647,.4441,-.3403;4.731,1.2383,-2.2631;4.3884,.4404,-1.1835;2.7312,.8478,-3.6629;3.6381,1.75,-3.1384;1.3895,2.5928,-4.6248;1.565,1.2522,-4.3779;.5121,2.9282,-5.1864;2.9243,-.4823,-3.4387;3.0973,.0536,-1.0002;2.4,-1.0923,-1.9971;.9284,-.962,-1.8243;3.1028,-2.4162,-1.84;-.1416,-3.617,.6743;-.007,-5.2413,-4.7462;-.2376,-4.9859,-3.7084;-.8391,-4.3038,-1.0875;.7858,-4.5788,-2.8543;-1.5539,-5.0784,-3.252;-1.8555,-4.7323,-1.9372;.4972,-4.2526,-1.5275;1.8203,-4.4989,-3.1996;-2.3503,-5.3934,-3.9286;-2.891,-4.7759,-1.5948;-1.0297,-3.8609,.2349;-2.1708,-3.6538,.8803;-3.0568,-4.1182,.445;-2.1661,-3.523,2.3477;-2.2247,-3.3463,5.1461;-3.3616,-3.7338,3.0503;-.9998,-3.2299,3.0703;-1.0265,-3.142,4.4591;-3.3899,-3.6476,4.4395;-4.2764,-3.9742,2.5011;-.0412,-3.091,2.5661;-.0987,-2.9325,4.9982;-4.3277,-3.8228,4.974;-2.2452,-3.2854,6.2377;1.4179,-3.8911,-.6212;2.1757,-3.3845,-1.0717;.522,.2477,-4.712;-3.0858,-1.728,.0273;-2.9107,-.9797,1.1904;-1.8514,-.3259,1.5235;-.3783,.5509,1.225;-.4607,1.4532,-.3996;.9772,-.7023,1.3982;-.3664,1.7401,2.6723;-3.8839,-.9755,2.0902;-3.6541,-.3641,3.35;-.2234,.7649,-1.2283;.3166,2.2416,-.3959;-1.44,1.938,-.5569;1.0096,-1.0678,2.4379;1.9499,-.2386,1.1576;.851,-1.544,.6973;-.4214,1.1988,3.6334;.5697,2.3284,2.6711;-1.2093,2.4529,2.6244;-2.7894,-.8197,3.8591;-4.5672,-.5417,3.9336;-3.4859,.719,3.2321;4.8378,-.6976,.9934;4.4166,-2.0265,.8573;3.7639,-2.6719,1.9003;3.549,-1.9752,3.0857;4.0221,-.6806,3.2784;4.6748,-.0488,2.2246;4.5259,-2.5269,-.1063;3.3717,-3.6825,1.7788;2.6873,-2.5751,4.1094;3.8351,-.1681,4.2226;5.014,.9846,2.3379;-.7938,.473,-4.2858;-1.7771,-.4913,-4.4594;-1.4335,-1.6854,-5.0842;-.1483,-1.9214,-5.5616;.8278,-.9541,-5.3668;-1.0347,1.3985,-3.7559;-2.7952,-.3413,-4.0989;-2.4493,-2.7313,-5.2221;.0779,-2.8637,-6.061;1.849,-1.1436,-5.7022;2.3488,-1.8779,5.046;2.32,-3.7199,3.9464;-2.2311,-3.6327,-6.0027;-3.4498,-2.6435,-4.5381;7.0739,1.1616,-1.4908;6.115,1.5503,-2.4711;8.4436,1.4857,-1.6888;8.8563,2.1462,-2.8199;9.1684,1.188,-.9247;9.9135,2.3843,-2.9642;6.5782,2.2148,-3.641;7.9107,2.504,-3.8105;5.8585,2.4866,-4.4166;8.2442,3.0089,-4.7217;3.4118,3.1534,-3.3428;2.2987,3.5655,-4.1334;4.222,4.1646,-2.7535;3.9758,5.4974,-2.9845;5.0485,3.8766,-2.102;4.6146,6.2533,-2.5191;2.0786,4.9511,-4.3665;2.9016,5.9002,-3.813;1.2288,5.2484,-4.989;2.7216,6.963,-3.9967;-4.4834,-2.2088,-.2902;-4.4534,-2.9986,-1.06;-5.0089,-2.5953,.5979;-5.1014,-1.3894,-.7038;-2.1849,-1.4259,-1.1438;-2.3241,-.3841,-1.4871;-1.1078,-1.5501,-.9414;-2.4266,-2.077,-1.9972;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650415289503</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002702496027 0.000395544071 0.016622569940 0.005338036307</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030495489 -0.000926586 -0.000048932 0.000255055 0.000313146 0.000352983 0.000393022 0.000450616 0.000598373 0.000752374 0.000892416 0.001084654 0.001196042 0.001248458 0.001309888 0.001380584 0.001585257 0.001702228 0.001745329 0.001854411 0.002052966 0.002423512 0.002528672 0.002610100 0.002745148 0.003057568 0.003220033 0.003377611 0.003781567 0.003878868 0.004296616 0.004662638 0.004773291 0.004907685 0.005778502 0.005872023 0.006084441 0.006424372 0.006744751 0.007470054 0.007772298 0.008049957 0.008974097 0.009253821 0.009675536 0.010317725 0.010728155 0.011388276 0.011617363 0.011803834 0.012673916 0.013021591 0.013811886 0.013979394 0.014710638 0.015155268 0.015437713 0.015565973 0.015871337 0.016574477 0.017212950 0.017337399 0.018654803 0.018772775 0.019512275 0.020345483 0.021120428 0.021179065 0.022261247 0.023040543 0.024773377 0.025672770 0.026386876 0.026505667 0.027015475 0.028668843 0.029245983 0.030960622 0.032065434 0.032669686 0.033465874 0.034266176 0.035526315 0.036114627 0.038141501 0.038923279 0.040279473 0.040413568 0.041336390 0.044289178 0.045109248 0.045772005 0.046835335 0.049098677 0.050158423 0.050617603 0.050872477 0.051146104 0.052425016 0.052465193 0.052772662 0.052864863 0.054161214 0.054569142 0.055248467 0.055889546 0.056393153 0.056454917 0.056895397 0.058186027 0.059787171 0.060455255 0.061336499 0.061610812 0.062768010 0.063328283 0.064889734 0.065210784 0.066213351 0.067478080 0.068373106 0.069872745 0.072422670 0.073916648 0.074231953 0.075991374 0.077378394 0.083234398 0.084627606 0.086450232 0.086813845 0.087372500 0.090025247 0.090424575 0.092793135 0.094534427 0.095126206 0.096233465 0.096890902 0.097629019 0.098651944 0.099414021 0.100100212 0.102160127 0.102374456 0.102795052 0.103162895 0.103859953 0.104037031 0.106567170 0.106923710 0.107257848 0.108866762 0.109879637 0.111500408 0.112127715 0.112881928 0.114583273 0.116021839 0.118760482 0.120395448 0.121170835 0.121912920 0.123479532 0.125121528 0.126115202 0.126780242 0.131420680 0.134647833 0.135382064 0.142288347 0.143232156 0.146759958 0.146994096 0.149488920 0.151759608 0.154350825 0.155499877 0.156494935 0.160673668 0.161582968 0.173098654 0.173643497 0.178267459 0.183801837 0.184723512 0.188862579 0.189879022 0.192967396 0.193752707 0.197907211 0.199629704 0.204806885 0.206735333 0.206906741 0.209652211 0.210986921 0.214856677 0.216532510 0.217466302 0.220294838 0.224680396 0.226123387 0.231667623 0.234629280 0.235302697 0.235539135 0.244349088 0.255585443 0.256863019 0.262503718 0.269411757 0.279072587 0.282768932 0.286124148 0.291076416 0.295656613 0.304114954 0.305425344 0.306877792 0.312755883 0.316158339 0.316437320 0.321828512 0.329066479 0.331810620 0.349512335 0.351510145 0.354253481 0.355114721 0.359706793 0.362115728 0.362401644 0.382929685 0.385332947 0.391036673 0.410054377 0.424962422 0.429305892 0.451304781 0.468189132 0.471903036 0.475779347 0.482098017 0.486429145 0.489622442 0.508299068 0.513583767 0.534671344 0.565771949 0.572489501 0.591010071 0.592975056 0.605745216 0.607093079 0.642190486 0.645654426 0.647277600 0.673914053 0.676683200 0.684406161 0.691309359 0.692479482 0.699042844 0.703945136 0.716382461 0.741010715 0.751089661 0.757880975 0.763854754 0.772171288 0.778597776 0.810272200 0.812302835 0.814637481 0.821115288 0.821499221 0.826211160 0.831053881 0.835211596 0.836134001 0.844980105 0.845560587 0.847952001 0.857785684 0.864390867 0.864776707 0.872856901 0.880346976 0.884087645 0.889077062 0.891722813 0.900357592 0.903395638 0.920106713 0.923110653 0.932473885 0.934612028 0.964446983 0.975591438 0.985164631 1.000530680 1.016013376 1.026367186 1.040946205 1.049267661 1.057024070 1.067564151 1.086098820 1.088289234 1.103196761 1.105686019 1.112131108 1.119199191 1.123203852 1.135079563 1.140861148 1.170701124 1.173722229 1.180208197 1.185326783 1.188260369 1.194314244 1.223487830 1.225530207 1.271572954 1.299699780 1.318182371 1.327600021 1.331338075 1.332929921 1.335320565 1.339002809 1.342311603 1.344804855 1.358249853 1.375067218 1.382581402 1.383661358 1.407557309 1.419386375 1.432687467 1.551283266 1.660575134 1.774183609</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">142</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33908154" y3="0.05256497" z3="-0.19151815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38469155" y3="0.16784716" z3="0.4188756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64609281" y3="0.44207161" z3="-0.34060476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72946055" y3="1.23670772" z3="-2.26241373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38821343" y3="0.43655851" z3="-1.18439716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73094609" y3="0.84492487" z3="-3.66378664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63585515" y3="1.7479931" z3="-3.13708768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38568934" y3="2.58937699" z3="-4.62179055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56391414" y3="1.24848831" z3="-4.37783569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50710453" y3="2.92469419" z3="-5.18168352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92617265" y3="-0.48499445" z3="-3.44129766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09778505" y3="0.04776042" z3="-1.00229972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40190281" y3="-1.09735469" z3="-2.0009576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93017674" y3="-0.9682575" z3="-1.82860621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10536329" y3="-2.42109573" z3="-1.84527671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14232968" y3="-3.61417849" z3="0.67455319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00990844" y3="-5.24566545" z3="-4.74399527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23864604" y3="-4.99131101" z3="-3.70557697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83837082" y3="-4.30684288" z3="-1.08518089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78511826" y3="-4.58344593" z3="-2.85249488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5548678" y3="-5.08285958" z3="-3.24856559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85557952" y3="-4.73524507" z3="-1.93394713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49707204" y3="-4.25558793" z3="-1.52602857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81662477" y3="-4.49839289" z3="-3.19883197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35478113" y3="-5.39378045" z3="-3.92532077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89378311" y3="-4.77179898" z3="-1.59126575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02970542" y3="-3.86006044" z3="0.23600142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17038427" y3="-3.65093059" z3="0.88129487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05715954" y3="-4.11435028" z3="0.44645063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16644937" y3="-3.51725705" z3="2.34836944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22655216" y3="-3.33562368" z3="5.14651493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36293796" y3="-3.72335096" z3="3.05064222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99972792" y3="-3.22697723" z3="3.07141113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02703621" y3="-3.13671762" z3="4.46009802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39205471" y3="-3.63475869" z3="4.43959919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27694757" y3="-3.96371667" z3="2.50156555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03930748" y3="-3.09393817" z3="2.56792865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09743519" y3="-2.93157617" z3="4.99958192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33017288" y3="-3.8070848" z3="4.97382882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24729733" y3="-3.27334424" z3="6.2381694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41432696" y3="-3.88863662" z3="-0.62173295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17575216" y3="-3.38707464" z3="-1.07445603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52209813" y3="0.24435547" z3="-4.71183941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08451033" y3="-1.72413852" z3="0.02580623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90758811" y3="-0.9738049" z3="1.18749754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84628976" y3="-0.3207585" z3="1.51829368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37080642" y3="0.55040383" z3="1.21828395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44883726" y3="1.45203767" z3="-0.40728909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97973837" y3="-0.70758677" z3="1.39463606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35427056" y3="1.74279343" z3="2.66340694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88023817" y3="-0.96649876" z3="2.08798287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65051945" y3="-0.3533976" z3="3.34638649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21705428" y3="0.76182148" z3="-1.23671196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32841264" y3="2.23746815" z3="-0.40396648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42634106" y3="1.94238705" z3="-0.5638307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00940077" y3="-1.07222196" z3="2.43496559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95114979" y3="-0.2440659" z3="1.15520486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85472928" y3="-1.54873911" z3="0.69432504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41005624" y3="1.20333676" z3="3.62563279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58206321" y3="2.32941038" z3="2.66073464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19565464" y3="2.4565103" z3="2.61487327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78789562" y3="-0.809746" z3="3.8576995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56455071" y3="-0.52853206" z3="3.92875753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48069532" y3="0.7291532" z3="3.22679341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83865116" y3="-0.70370764" z3="0.99125312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41584851" y3="-2.03181159" z3="0.85326534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76310867" y3="-2.67814523" z3="1.89564412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54987282" y3="-1.98329434" z3="3.0825511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02503122" y3="-0.68977513" z3="3.27720901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67794458" y3="-0.05705809" z3="2.22409198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52345471" y3="-2.53054543" z3="-0.11153026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36929538" y3="-3.6878416" z3="1.7725945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68722043" y3="-2.58329975" z3="4.10532596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83948041" y3="-0.17883787" z3="4.2226423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01869126" y3="0.97562354" z3="2.33924332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79427894" y3="0.46874718" z3="-4.28667878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77651153" y3="-0.49763468" z3="-4.46240256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43227328" y3="-1.6914071" z3="-5.08470635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14666387" y3="-1.92656242" z3="-5.56309946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82876984" y3="-0.95696484" z3="-5.3640412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03672965" y3="1.39403193" z3="-3.75791797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79449953" y3="-0.34802392" z3="-4.10141076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44704347" y3="-2.73778659" z3="-5.22394807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08127175" y3="-2.86864224" z3="-6.06186639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84965806" y3="-1.14638816" z3="-5.69965159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35064835" y3="-1.88712771" z3="5.04342446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31686702" y3="-3.72710965" z3="3.93976038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22653974" y3="-3.64012069" z3="-6.0033155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44875858" y3="-2.64912362" z3="-4.54221399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07187468" y3="1.16300455" z3="-1.48933103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11258113" y3="1.55209779" z3="-2.46910297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44107378" y3="1.49232133" z3="-1.68547835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85266008" y3="2.1577773" z3="-2.81422907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16630462" y3="1.19436662" z3="-0.92193956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90951921" y3="2.40094105" z3="-2.95684358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57449832" y3="2.22132398" z3="-3.63669983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90643615" y3="2.5157303" z3="-3.80434401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85443806" y3="2.49393169" z3="-4.41169978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23905547" y3="3.02427061" z3="-4.71364682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40597438" y3="3.15189738" z3="-3.33717806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29234322" y3="3.56346534" z3="-4.1272727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21303711" y3="4.16398125" z3="-2.74403944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96415076" y3="5.49650302" z3="-2.97178546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04032804" y3="3.87588093" z3="-2.09347638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6004102" y3="6.2530223" z3="-2.50322305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06929934" y3="4.94919033" z3="-4.35688194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88971601" y3="5.89879017" z3="-3.80017903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21939282" y3="5.2459266" z3="-4.97927671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70688956" y3="6.96193204" z3="-3.98076414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48225413" y3="-2.20426693" z3="-0.29064984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45270855" y3="-2.99583925" z3="-1.05852037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00832251" y3="-2.58847477" z3="0.59799551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09926385" y3="-1.38519657" z3="-0.70631766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18312264" y3="-1.42541171" z3="-1.14561742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32100091" y3="-0.38402072" z3="-1.49111987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10631954" y3="-1.5504219" z3="-0.94257518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42503663" y3="-2.07821718" z3="-1.99764034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0526,-.1915;7.3847,.1678,.4189;6.6461,.4421,-.3406;4.7295,1.2367,-2.2624;4.3882,.4366,-1.1844;2.7309,.8449,-3.6638;3.6359,1.748,-3.1371;1.3857,2.5894,-4.6218;1.5639,1.2485,-4.3778;.5071,2.9247,-5.1817;2.9262,-.485,-3.4413;3.0978,.0478,-1.0023;2.4019,-1.0974,-2.001;.9302,-.9683,-1.8286;3.1054,-2.4211,-1.8453;-.1423,-3.6142,.6746;-.0099,-5.2457,-4.744;-.2386,-4.9913,-3.7056;-.8384,-4.3068,-1.0852;.7851,-4.5834,-2.8525;-1.5549,-5.0829,-3.2486;-1.8556,-4.7352,-1.9339;.4971,-4.2556,-1.526;1.8166,-4.4984,-3.1988;-2.3548,-5.3938,-3.9253;-2.8938,-4.7718,-1.5913;-1.0297,-3.8601,.236;-2.1704,-3.6509,.8813;-3.0572,-4.1144,.4465;-2.1664,-3.5173,2.3484;-2.2266,-3.3356,5.1465;-3.3629,-3.7234,3.0506;-.9997,-3.227,3.0714;-1.027,-3.1367,4.4601;-3.3921,-3.6348,4.4396;-4.2769,-3.9637,2.5016;-.0393,-3.0939,2.5679;-.0974,-2.9316,4.9996;-4.3302,-3.8071,4.9738;-2.2473,-3.2733,6.2382;1.4143,-3.8886,-.6217;2.1758,-3.3871,-1.0745;.5221,.2444,-4.7118;-3.0845,-1.7241,.0258;-2.9076,-.9738,1.1875;-1.8463,-.3208,1.5183;-.3708,.5504,1.2183;-.4488,1.452,-.4073;.9797,-.7076,1.3946;-.3543,1.7428,2.6634;-3.8802,-.9665,2.088;-3.6505,-.3534,3.3464;-.2171,.7618,-1.2367;.3284,2.2375,-.404;-1.4263,1.9424,-.5638;1.0094,-1.0722,2.435;1.9511,-.2441,1.1552;.8547,-1.5487,.6943;-.4101,1.2033,3.6256;.5821,2.3294,2.6607;-1.1957,2.4565,2.6149;-2.7879,-.8097,3.8577;-4.5646,-.5285,3.9288;-3.4807,.7292,3.2268;4.8387,-.7037,.9913;4.4158,-2.0318,.8533;3.7631,-2.6781,1.8956;3.5499,-1.9833,3.0826;4.025,-.6898,3.2772;4.6779,-.0571,2.2241;4.5235,-2.5305,-.1115;3.3693,-3.6878,1.7726;2.6872,-2.5833,4.1053;3.8395,-.1788,4.2226;5.0187,.9756,2.3392;-.7943,.4687,-4.2867;-1.7765,-.4976,-4.4624;-1.4323,-1.6914,-5.0847;-.1467,-1.9266,-5.5631;.8288,-.957,-5.364;-1.0367,1.394,-3.7579;-2.7945,-.348,-4.1014;-2.447,-2.7378,-5.2239;.0813,-2.8686,-6.0619;1.8497,-1.1464,-5.6997;2.3506,-1.8871,5.0434;2.3169,-3.7271,3.9398;-2.2265,-3.6401,-6.0033;-3.4488,-2.6491,-4.5422;7.0719,1.163,-1.4893;6.1126,1.5521,-2.4691;8.4411,1.4923,-1.6855;8.8527,2.1578,-2.8142;9.1663,1.1944,-.9219;9.9095,2.4009,-2.9568;6.5745,2.2213,-3.6367;7.9064,2.5157,-3.8043;5.8544,2.4939,-4.4117;8.2391,3.0243,-4.7136;3.406,3.1519,-3.3372;2.2923,3.5635,-4.1273;4.213,4.164,-2.744;3.9642,5.4965,-2.9718;5.0403,3.8759,-2.0935;4.6004,6.253,-2.5032;2.0693,4.9492,-4.3569;2.8897,5.8988,-3.8002;1.2194,5.2459,-4.9793;2.7069,6.9619,-3.9808;-4.4823,-2.2043,-.2906;-4.4527,-2.9958,-1.0585;-5.0083,-2.5885,.598;-5.0993,-1.3852,-.7063;-2.1831,-1.4254,-1.1456;-2.321,-.384,-1.4911;-1.1063,-1.5504,-.9426;-2.425,-2.0782,-1.9976;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416174982</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002049062949 0.000377959300 0.017062137379 0.005340198984</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030497299 -0.000763055 -0.000040304 0.000255825 0.000313736 0.000355015 0.000395008 0.000451209 0.000598341 0.000755886 0.000892410 0.001084368 0.001204383 0.001248447 0.001309865 0.001380894 0.001590788 0.001703820 0.001745187 0.001856316 0.002054576 0.002423547 0.002528635 0.002610785 0.002745162 0.003057857 0.003219065 0.003378172 0.003782562 0.003881119 0.004296334 0.004662438 0.004773426 0.004908132 0.005782189 0.005873309 0.006084583 0.006427889 0.006750084 0.007476483 0.007771805 0.008051265 0.008976342 0.009257085 0.009680022 0.010318294 0.010733280 0.011388678 0.011620002 0.011806159 0.012674315 0.013028756 0.013811855 0.013981124 0.014710375 0.015159221 0.015437889 0.015567015 0.015871637 0.016574766 0.017213259 0.017338520 0.018659982 0.018776665 0.019524437 0.020346137 0.021120774 0.021187338 0.022261816 0.023041310 0.024774032 0.025681094 0.026411201 0.026507250 0.027035065 0.028668851 0.029261842 0.030961906 0.032071035 0.032825422 0.033467907 0.034398879 0.035526377 0.036123408 0.038150528 0.038923194 0.040282311 0.040414385 0.041341527 0.044289783 0.045108931 0.045890179 0.046853510 0.049098805 0.050166743 0.050618360 0.050875261 0.051146388 0.052425143 0.052465577 0.052772650 0.052865391 0.054163632 0.054581660 0.055251105 0.055902784 0.056394467 0.056456071 0.056895240 0.058189689 0.059792045 0.060460173 0.061337103 0.061615012 0.062772645 0.063391617 0.064891065 0.065249970 0.066213800 0.067479428 0.068402236 0.069873423 0.072422476 0.073931575 0.074233246 0.075991376 0.077382151 0.083242003 0.084633516 0.086472618 0.086813844 0.087379094 0.090025818 0.090424369 0.092803629 0.094534797 0.095126280 0.096235673 0.096891134 0.097636679 0.098654045 0.099415979 0.100104482 0.102182279 0.102444439 0.102805563 0.103174017 0.103866585 0.104093497 0.106583549 0.106969840 0.107275025 0.108866687 0.109903012 0.111504702 0.112127791 0.112885326 0.114597397 0.116025265 0.118764671 0.120408977 0.121185351 0.121912863 0.123479778 0.125121620 0.126115357 0.126781981 0.131421149 0.134648084 0.135383181 0.142288119 0.143231144 0.146760192 0.146993877 0.149488598 0.151760335 0.154353120 0.155499802 0.156497952 0.160700857 0.161583609 0.173099445 0.173648701 0.178271966 0.183806482 0.184723407 0.188862455 0.189881495 0.192967138 0.193761518 0.197907597 0.199632299 0.204809914 0.206735228 0.206906774 0.209653960 0.210994373 0.214859034 0.216536611 0.217489260 0.220297539 0.224698417 0.226124123 0.231667867 0.234634177 0.235306114 0.235547558 0.244353907 0.255587779 0.256868395 0.262506856 0.269435729 0.279081563 0.282773189 0.286124150 0.291104514 0.295690300 0.304117608 0.305426754 0.306916382 0.312774517 0.316180458 0.316437304 0.321829408 0.329082020 0.331855266 0.349513060 0.351514774 0.354292226 0.355115568 0.359708134 0.362149180 0.362425660 0.382948830 0.385334311 0.391037174 0.410072626 0.424962720 0.429323410 0.451417122 0.468192239 0.472297534 0.475780013 0.482136483 0.486490414 0.489622380 0.508337839 0.513624696 0.534671983 0.565771948 0.572489778 0.591016272 0.593008758 0.605748014 0.607159121 0.642432893 0.645659107 0.647296094 0.673930398 0.676740388 0.684414852 0.691310891 0.692492054 0.699042892 0.703945142 0.716393516 0.741012779 0.751090496 0.757884346 0.764052108 0.772181039 0.778606941 0.810298513 0.812315485 0.814744346 0.821239098 0.821505448 0.826407578 0.831053975 0.835215910 0.836160935 0.845004410 0.845570510 0.847983353 0.857789656 0.864393143 0.864776699 0.872861277 0.880358605 0.884103499 0.889077499 0.891725011 0.900358082 0.903403253 0.920111516 0.923110843 0.932475091 0.934616525 0.964447800 0.975591582 0.985172059 1.000535865 1.016021167 1.026367583 1.040947814 1.049271478 1.057024243 1.067565714 1.086102084 1.088295037 1.103196776 1.105738965 1.112131156 1.119199238 1.123204089 1.135091061 1.141135146 1.170704499 1.173734267 1.180240182 1.185328069 1.188305788 1.194314350 1.223490136 1.225686035 1.271587518 1.299703263 1.318204308 1.327606824 1.331340444 1.332938281 1.335324603 1.339169056 1.342321278 1.344805063 1.358270002 1.375071208 1.382595785 1.383670018 1.407877480 1.419394473 1.432926732 1.551292163 1.660581761 1.774185436</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">143</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33927959" y3="0.04823675" z3="-0.19229094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38457356" y3="0.1687776" z3="0.41953319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64556161" y3="0.44258627" z3="-0.33972011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72736704" y3="1.23549964" z3="-2.26073901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38762204" y3="0.43191108" z3="-1.18462749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72903871" y3="0.84378559" z3="-3.66212607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63248578" y3="1.74693766" z3="-3.13363483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38103474" y3="2.58758151" z3="-4.61639133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56116099" y3="1.24694326" z3="-4.37494433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50249934" y3="2.92182293" z3="-5.17705228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92723471" y3="-0.48668157" z3="-3.4431931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09782477" y3="0.0406984" z3="-1.00304295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40183786" y3="-1.102048" z3="-2.00439474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93004127" y3="-0.97202369" z3="-1.83287931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10409138" y3="-2.42642918" z3="-1.85009012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14156298" y3="-3.61699904" z3="0.67578372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0157802" y3="-5.25204629" z3="-4.74239554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24434896" y3="-4.9947846" z3="-3.70455305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84113285" y3="-4.30707574" z3="-1.08419299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78052301" y3="-4.586546" z3="-2.85296118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55993338" y3="-5.08596036" z3="-3.24583063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85914238" y3="-4.73696508" z3="-1.93131485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49431379" y3="-4.25763952" z3="-1.52643668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81452579" y3="-4.50760208" z3="-3.20027444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35736197" y3="-5.40207364" z3="-3.92053372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89396228" y3="-4.77976815" z3="-1.58716075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03021578" y3="-3.86037986" z3="0.23721046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17077104" y3="-3.64745993" z3="0.88186911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05829562" y3="-4.110123" z3="0.44771618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16612232" y3="-3.51248832" z3="2.34892426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22561795" y3="-3.32612791" z3="5.14670813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36325354" y3="-3.71428108" z3="3.0514568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99866961" y3="-3.22389866" z3="3.0714165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02570092" y3="-3.13135401" z3="4.45997164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39218302" y3="-3.62310737" z3="4.44025404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27914175" y3="-3.95137899" z3="2.50244637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03892544" y3="-3.0924964" z3="2.56751518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09696355" y3="-2.9258259" z3="4.99895205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33152827" y3="-3.79073469" z3="4.97468111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24666159" y3="-3.26112243" z3="6.2381331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41675213" y3="-3.89470694" z3="-0.62265358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17487256" y3="-3.39211163" z3="-1.07612479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52106789" y3="0.24054746" z3="-4.71287905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08025848" y3="-1.72125543" z3="0.02417156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90335177" y3="-0.96847482" z3="1.18417465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84283335" y3="-0.31538911" z3="1.51454318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36511428" y3="0.55292665" z3="1.2135559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4425534" y3="1.45080627" z3="-0.41340402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98392034" y3="-0.70544896" z3="1.39303438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3469649" y3="1.74708419" z3="2.65654523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87662427" y3="-0.95820002" z3="2.08372437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64500948" y3="-0.34259904" z3="3.34131764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21248982" y3="0.75860988" z3="-1.24104568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34106968" y3="2.23277518" z3="-0.41278354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41815723" y3="1.94340143" z3="-0.57021461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0113574" y3="-1.07019744" z3="2.43334434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95869761" y3="-0.24501399" z3="1.15576656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85779462" y3="-1.54701794" z3="0.69243852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40265186" y3="1.20958525" z3="3.61971499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59152512" y3="2.33150516" z3="2.65157484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18698778" y3="2.46283665" z3="2.60717998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78176611" y3="-0.79847316" z3="3.85240794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55880181" y3="-0.51508805" z3="3.92601251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4739989" y3="0.73940259" z3="3.21920308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83991673" y3="-0.71044635" z3="0.98938634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41433453" y3="-2.0374351" z3="0.84910612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76142683" y3="-2.6846016" z3="1.89087284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55112015" y3="-1.99181087" z3="3.07949535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02959389" y3="-0.69984216" z3="3.27651282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68221288" y3="-0.06618983" z3="2.22375645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52008211" y3="-2.53452751" z3="-0.11663101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36512616" y3="-3.69313002" z3="1.76595167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68850274" y3="-2.59191802" z3="4.10223828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84650085" y3="-0.19060942" z3="4.22333433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02494562" y3="0.96558247" z3="2.340441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79602992" y3="0.4634578" z3="-4.28968912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77703942" y3="-0.50292695" z3="-4.46586612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43019997" y3="-1.69642151" z3="-5.08847763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14367472" y3="-1.92985474" z3="-5.56427074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8302344" y3="-0.96052153" z3="-5.36713649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03970429" y3="1.38828354" z3="-3.76025214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7958258" y3="-0.35477934" z3="-4.10703504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44379868" y3="-2.744264" z3="-5.22850175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08531787" y3="-2.87162174" z3="-6.06310259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8522498" y3="-1.14847632" z3="-5.70042261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35553041" y3="-1.89717356" z3="5.04280034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31497746" y3="-3.73411366" z3="3.93471249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22156378" y3="-3.64738468" z3="-6.00603637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44670844" y3="-2.65607856" z3="-4.54778161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06999803" y3="1.16723093" z3="-1.48666369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10996893" y3="1.55502056" z3="-2.4663332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43827402" y3="1.50056445" z3="-1.68123914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84855221" y3="2.16898971" z3="-2.8084305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16394442" y3="1.20373306" z3="-0.91763519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90457594" y3="2.4148403" z3="-2.94985893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57066517" y3="2.22698256" z3="-3.63253892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90179745" y3="2.52516252" z3="-3.79874363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8501339" y3="2.49748597" z3="-4.40796931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23348" y3="3.03611553" z3="-4.70693901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40026461" y3="3.15028124" z3="-3.33053653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28599587" y3="3.56152777" z3="-4.11984243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20544501" y3="4.16182588" z3="-2.73484448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95357106" y3="5.49453602" z3="-2.9587113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0325916" y3="3.87402519" z3="-2.08411308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58892819" y3="6.25029071" z3="-2.48894305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05996755" y3="4.94739382" z3="-4.34552228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87835014" y3="5.89698948" z3="-3.78601107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20936052" y3="5.24430813" z3="-4.96688058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69350777" y3="6.96003394" z3="-3.963702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47953367" y3="-2.19876789" z3="-0.29179912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45204233" y3="-2.99257936" z3="-1.05784219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00702835" y3="-2.5792126" z3="0.59771644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09452299" y3="-1.37908165" z3="-0.70960302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17911634" y3="-1.42542234" z3="-1.14840794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31695221" y3="-0.38516312" z3="-1.49608785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10209958" y3="-1.55084529" z3="-0.9459864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42217551" y3="-2.07965873" z3="-1.99937145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3393,.0482,-.1923;7.3846,.1688,.4195;6.6456,.4426,-.3397;4.7274,1.2355,-2.2607;4.3876,.4319,-1.1846;2.729,.8438,-3.6621;3.6325,1.7469,-3.1336;1.381,2.5876,-4.6164;1.5612,1.2469,-4.3749;.5025,2.9218,-5.1771;2.9272,-.4867,-3.4432;3.0978,.0407,-1.003;2.4018,-1.102,-2.0044;.93,-.972,-1.8329;3.1041,-2.4264,-1.8501;-.1416,-3.617,.6758;-.0158,-5.252,-4.7424;-.2443,-4.9948,-3.7046;-.8411,-4.3071,-1.0842;.7805,-4.5865,-2.853;-1.5599,-5.086,-3.2458;-1.8591,-4.737,-1.9313;.4943,-4.2576,-1.5264;1.8145,-4.5076,-3.2003;-2.3574,-5.4021,-3.9205;-2.894,-4.7798,-1.5872;-1.0302,-3.8604,.2372;-2.1708,-3.6475,.8819;-3.0583,-4.1101,.4477;-2.1661,-3.5125,2.3489;-2.2256,-3.3261,5.1467;-3.3633,-3.7143,3.0515;-.9987,-3.2239,3.0714;-1.0257,-3.1314,4.46;-3.3922,-3.6231,4.4403;-4.2791,-3.9514,2.5024;-.0389,-3.0925,2.5675;-.097,-2.9258,4.999;-4.3315,-3.7907,4.9747;-2.2467,-3.2611,6.2381;1.4168,-3.8947,-.6227;2.1749,-3.3921,-1.0761;.5211,.2405,-4.7129;-3.0803,-1.7213,.0242;-2.9034,-.9685,1.1842;-1.8428,-.3154,1.5145;-.3651,.5529,1.2136;-.4426,1.4508,-.4134;.9839,-.7054,1.393;-.347,1.7471,2.6565;-3.8766,-.9582,2.0837;-3.645,-.3426,3.3413;-.2125,.7586,-1.241;.3411,2.2328,-.4128;-1.4182,1.9434,-.5702;1.0114,-1.0702,2.4333;1.9587,-.245,1.1558;.8578,-1.547,.6924;-.4027,1.2096,3.6197;.5915,2.3315,2.6516;-1.187,2.4628,2.6072;-2.7818,-.7985,3.8524;-4.5588,-.5151,3.926;-3.474,.7394,3.2192;4.8399,-.7104,.9894;4.4143,-2.0374,.8491;3.7614,-2.6846,1.8909;3.5511,-1.9918,3.0795;4.0296,-.6998,3.2765;4.6822,-.0662,2.2238;4.5201,-2.5345,-.1166;3.3651,-3.6931,1.766;2.6885,-2.5919,4.1022;3.8465,-.1906,4.2233;5.0249,.9656,2.3404;-.796,.4635,-4.2897;-1.777,-.5029,-4.4659;-1.4302,-1.6964,-5.0885;-.1437,-1.9299,-5.5643;.8302,-.9605,-5.3671;-1.0397,1.3883,-3.7603;-2.7958,-.3548,-4.107;-2.4438,-2.7443,-5.2285;.0853,-2.8716,-6.0631;1.8522,-1.1485,-5.7004;2.3555,-1.8972,5.0428;2.315,-3.7341,3.9347;-2.2216,-3.6474,-6.006;-3.4467,-2.6561,-4.5478;7.07,1.1672,-1.4867;6.11,1.555,-2.4663;8.4383,1.5006,-1.6812;8.8486,2.169,-2.8084;9.1639,1.2037,-.9176;9.9046,2.4148,-2.9499;6.5707,2.227,-3.6325;7.9018,2.5252,-3.7987;5.8501,2.4975,-4.408;8.2335,3.0361,-4.7069;3.4003,3.1503,-3.3305;2.286,3.5615,-4.1198;4.2054,4.1618,-2.7348;3.9536,5.4945,-2.9587;5.0326,3.874,-2.0841;4.5889,6.2503,-2.4889;2.06,4.9474,-4.3455;2.8784,5.897,-3.786;1.2094,5.2443,-4.9669;2.6935,6.96,-3.9637;-4.4795,-2.1988,-.2918;-4.452,-2.9926,-1.0578;-5.007,-2.5792,.5977;-5.0945,-1.3791,-.7096;-2.1791,-1.4254,-1.1484;-2.317,-.3852,-1.4961;-1.1021,-1.5508,-.946;-2.4222,-2.0797,-1.9994;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417046138</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001823395617 0.000342867345 0.019895614370 0.005342628678</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030498720 -0.000713150 -0.000037085 0.000256101 0.000312291 0.000354985 0.000394826 0.000455196 0.000598660 0.000753595 0.000893177 0.001084759 0.001209105 0.001248453 0.001309941 0.001381039 0.001607221 0.001705325 0.001745469 0.001861298 0.002054432 0.002424823 0.002530208 0.002610708 0.002745222 0.003058392 0.003220493 0.003378250 0.003785936 0.003880325 0.004296956 0.004664361 0.004773414 0.004912390 0.005787104 0.005874418 0.006084626 0.006428558 0.006749595 0.007477643 0.007779954 0.008057085 0.008982673 0.009258217 0.009686823 0.010318635 0.010737917 0.011388730 0.011619052 0.011812991 0.012674691 0.013033544 0.013811592 0.013983466 0.014712747 0.015166849 0.015437830 0.015568540 0.015871819 0.016577935 0.017214622 0.017339601 0.018661251 0.018782108 0.019537456 0.020346881 0.021120867 0.021200258 0.022263763 0.023041942 0.024775679 0.025691900 0.026428498 0.026513847 0.027060005 0.028668814 0.029270971 0.030963247 0.032078132 0.032940886 0.033469549 0.034545450 0.035526482 0.036129768 0.038163123 0.038923295 0.040282868 0.040414130 0.041345945 0.044290561 0.045108804 0.045981154 0.046871901 0.049099234 0.050178298 0.050623184 0.050877267 0.051147199 0.052425289 0.052466157 0.052772652 0.052866740 0.054167575 0.054593889 0.055254295 0.055914521 0.056395194 0.056460130 0.056895592 0.058193262 0.059798147 0.060468500 0.061337903 0.061624151 0.062776250 0.063449482 0.064891962 0.065291963 0.066214968 0.067480262 0.068440739 0.069876367 0.072422481 0.073949486 0.074233796 0.075991528 0.077382752 0.083245570 0.084640218 0.086490935 0.086814087 0.087381289 0.090025724 0.090432428 0.092809062 0.094535327 0.095126264 0.096236832 0.096891717 0.097640077 0.098659820 0.099418334 0.100105150 0.102196173 0.102491387 0.102816511 0.103183679 0.103867417 0.104144845 0.106601349 0.107023001 0.107285612 0.108870188 0.109933935 0.111505024 0.112128052 0.112886290 0.114608129 0.116025465 0.118768281 0.120421646 0.121202133 0.121916642 0.123479764 0.125121742 0.126115350 0.126784630 0.131425007 0.134650048 0.135385803 0.142288225 0.143235608 0.146761405 0.146995961 0.149488991 0.151759919 0.154356086 0.155500082 0.156497789 0.160722788 0.161589340 0.173100697 0.173652560 0.178271602 0.183807179 0.184724230 0.188862526 0.189882490 0.192969505 0.193770625 0.197907604 0.199634640 0.204810918 0.206735429 0.206906923 0.209655697 0.211003655 0.214860532 0.216538660 0.217504182 0.220299054 0.224714415 0.226125146 0.231667900 0.234638995 0.235306595 0.235553645 0.244357517 0.255589060 0.256873451 0.262510598 0.269449072 0.279087087 0.282777977 0.286124233 0.291120883 0.295703744 0.304119148 0.305428739 0.306947295 0.312810937 0.316192044 0.316439238 0.321830402 0.329091849 0.331874607 0.349513031 0.351517209 0.354306103 0.355116750 0.359708561 0.362175890 0.362433490 0.382948819 0.385336230 0.391037934 0.410088528 0.424963308 0.429354666 0.451540789 0.468196436 0.472656412 0.475780167 0.482188430 0.486520435 0.489622520 0.508359815 0.513663014 0.534673252 0.565772112 0.572489746 0.591016669 0.593052256 0.605757043 0.607210087 0.642703489 0.645666777 0.647319662 0.673957927 0.676796037 0.684425039 0.691311668 0.692511280 0.699043204 0.703945144 0.716412181 0.741016674 0.751090728 0.757889876 0.764233877 0.772186825 0.778614260 0.810323675 0.812328561 0.814833876 0.821300866 0.821513112 0.826621249 0.831054285 0.835218677 0.836165223 0.845025826 0.845585158 0.847984387 0.857795621 0.864393434 0.864776691 0.872868561 0.880388615 0.884118550 0.889079181 0.891730486 0.900361540 0.903406775 0.920116577 0.923110895 0.932482319 0.934618258 0.964448791 0.975591585 0.985186243 1.000546056 1.016036825 1.026367973 1.040948244 1.049273493 1.057025059 1.067570845 1.086104885 1.088306703 1.103197712 1.105779854 1.112131247 1.119200609 1.123204085 1.135100626 1.141402420 1.170705198 1.173746559 1.180287585 1.185330338 1.188358557 1.194314799 1.223491994 1.225856015 1.271587544 1.299703909 1.318240526 1.327615589 1.331344875 1.332942617 1.335324558 1.339295712 1.342325328 1.344805129 1.358295798 1.375073737 1.382597737 1.383696883 1.408020655 1.419406157 1.432994617 1.551301259 1.660594061 1.774230309</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">144</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33939616" y3="0.04449293" z3="-0.19267014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38411586" y3="0.16695334" z3="0.41930536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64470939" y3="0.44019128" z3="-0.33980048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72543707" y3="1.23359568" z3="-2.25941063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38716532" y3="0.42755354" z3="-1.18483128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72813262" y3="0.84083518" z3="-3.66283302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62977137" y3="1.74471386" z3="-3.1316693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37573885" y3="2.58546414" z3="-4.61082812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55941436" y3="1.24351205" z3="-4.37486093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49582796" y3="2.92060988" z3="-5.16863698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92800437" y3="-0.4893727" z3="-3.44583611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09808229" y3="0.03311686" z3="-1.00435839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40344942" y3="-1.10831526" z3="-2.0082888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93163105" y3="-0.97998405" z3="-1.83603965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10650686" y3="-2.43274064" z3="-1.85718238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14232465" y3="-3.61388854" z3="0.67364713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02175345" y3="-5.26097787" z3="-4.74114868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2481458" y3="-5.00364702" z3="-3.70293642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8420995" y3="-4.31065196" z3="-1.08320462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77751574" y3="-4.59370417" z3="-2.85320888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56331763" y3="-5.09376017" z3="-3.24261591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86108139" y3="-4.7418728" z3="-1.92840557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49254084" y3="-4.26200415" z3="-1.52703679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80842822" y3="-4.51002886" z3="-3.20184303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36455593" y3="-5.40681512" z3="-3.91668013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89840438" y3="-4.7778785" z3="-1.58316552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03073227" y3="-3.85894377" z3="0.23679034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17042635" y3="-3.6433598" z3="0.88185481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05883516" y3="-4.10525144" z3="0.44894824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16569864" y3="-3.50524524" z3="2.34850685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22440345" y3="-3.31536115" z3="5.14607366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36295651" y3="-3.70417583" z3="3.05154801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99757742" y3="-3.2179305" z3="3.07046094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02423481" y3="-3.12358779" z3="4.45887136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39134005" y3="-3.6114987" z3="4.44024898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27809534" y3="-3.94215412" z3="2.50328022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03651633" y3="-3.09093316" z3="2.56637048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09359443" y3="-2.92140878" z3="4.99770697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32993121" y3="-3.77846768" z3="4.9751354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24450304" y3="-3.25002086" z3="6.2375604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4127136" y3="-3.8939683" z3="-0.62568009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17469677" y3="-3.39661129" z3="-1.08160384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52069311" y3="0.23778749" z3="-4.71334721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07777264" y3="-1.71676713" z3="0.02094487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89965504" y3="-0.96256725" z3="1.18012739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83724013" y3="-0.31078989" z3="1.50935522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35924899" y3="0.55607104" z3="1.20976081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43215611" y3="1.45180852" z3="-0.41904753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98764836" y3="-0.70520956" z3="1.39354886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34210296" y3="1.75358813" z3="2.65031173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87275409" y3="-0.9497324" z3="2.08005569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6420333" y3="-0.33296053" z3="3.33639825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2030296" y3="0.75762408" z3="-1.24563095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3492323" y3="2.23339472" z3="-0.41827733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40717704" y3="1.94596502" z3="-0.57798335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01319761" y3="-1.06705807" z3="2.4347023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96180758" y3="-0.24570074" z3="1.15560067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86161268" y3="-1.54839108" z3="0.6952164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39964743" y3="1.21794249" z3="3.61453197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.595579" y3="2.33823479" z3="2.6459793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18196443" y3="2.46905264" z3="2.59820775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78065562" y3="-0.789703" z3="3.84939904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55654834" y3="-0.50405975" z3="3.91886534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46935945" y3="0.74872864" z3="3.21308862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84134359" y3="-0.71580797" z3="0.98845631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4128368" y3="-2.04167026" z3="0.84627708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76033593" y3="-2.6895931" z3="1.88782548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55338841" y3="-1.99883267" z3="3.07818561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03503828" y3="-0.70842685" z3="3.2770028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68741989" y3="-0.07395523" z3="2.22459789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51552541" y3="-2.53695968" z3="-0.12094985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36167265" y3="-3.69696687" z3="1.76150596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6908375" y3="-2.59909684" z3="4.10090161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85442516" y3="-0.20073855" z3="4.22500458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03268276" y3="0.9568517" z3="2.34303028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79728213" y3="0.45850311" z3="-4.2910988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77657187" y3="-0.51001516" z3="-4.46951075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42766294" y3="-1.70275635" z3="-5.09251965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14055205" y3="-1.93397672" z3="-5.56795418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83174836" y3="-0.96199658" z3="-5.3669272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04339954" y3="1.38250365" z3="-3.76148786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7958545" y3="-0.36382874" z3="-4.11066204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4391115" y3="-2.75234531" z3="-5.23167575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0910436" y3="-2.87507572" z3="-6.06714862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85382791" y3="-1.14837888" z3="-5.70056677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36196461" y3="-1.90605094" z3="5.04392945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31286887" y3="-3.73958122" z3="3.93057319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21390095" y3="-3.65612167" z3="-6.00810038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4429655" y3="-2.66509437" z3="-4.55291578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0678101" y3="1.16694784" z3="-1.48569155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10728422" y3="1.55582493" z3="-2.46428279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43537349" y3="1.50284781" z3="-1.67994042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84430088" y3="2.17507269" z3="-2.80565117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16148783" y3="1.20511024" z3="-0.91721753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89988821" y3="2.42326936" z3="-2.94679644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56665859" y3="2.23256921" z3="-3.62873261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89713459" y3="2.53341108" z3="-3.79460901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84577511" y3="2.50549183" z3="-4.40278306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22782698" y3="3.04797226" z3="-4.70143692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39428334" y3="3.14864377" z3="-3.32402089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27849011" y3="3.56029991" z3="-4.11105182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19732627" y3="4.16043802" z3="-2.72530487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94200039" y3="5.49340122" z3="-2.94427661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02605699" y3="3.87203907" z3="-2.07668743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57461009" y3="6.25012942" z3="-2.47062769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04921402" y3="4.94638258" z3="-4.33216706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86549568" y3="5.89611616" z3="-3.76979763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19779194" y3="5.24317116" z3="-4.95248913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67794047" y3="6.95944117" z3="-3.94380639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47666304" y3="-2.19355763" z3="-0.29517307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44852496" y3="-2.98810895" z3="-1.05971493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00495394" y3="-2.5723525" z3="0.59438256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09049092" y3="-1.37420264" z3="-0.71511344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17484201" y3="-1.42464593" z3="-1.15085123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30932292" y3="-0.38377981" z3="-1.50016568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09860868" y3="-1.55156313" z3="-0.9465731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41751406" y3="-2.08002816" z3="-2.00057325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3394,.0445,-.1927;7.3841,.167,.4193;6.6447,.4402,-.3398;4.7254,1.2336,-2.2594;4.3872,.4276,-1.1848;2.7281,.8408,-3.6628;3.6298,1.7447,-3.1317;1.3757,2.5855,-4.6108;1.5594,1.2435,-4.3749;.4958,2.9206,-5.1686;2.928,-.4894,-3.4458;3.0981,.0331,-1.0044;2.4034,-1.1083,-2.0083;.9316,-.98,-1.836;3.1065,-2.4327,-1.8572;-.1423,-3.6139,.6736;-.0218,-5.261,-4.7411;-.2481,-5.0036,-3.7029;-.8421,-4.3107,-1.0832;.7775,-4.5937,-2.8532;-1.5633,-5.0938,-3.2426;-1.8611,-4.7419,-1.9284;.4925,-4.262,-1.527;1.8084,-4.51,-3.2018;-2.3646,-5.4068,-3.9167;-2.8984,-4.7779,-1.5832;-1.0307,-3.8589,.2368;-2.1704,-3.6434,.8819;-3.0588,-4.1053,.4489;-2.1657,-3.5052,2.3485;-2.2244,-3.3154,5.1461;-3.363,-3.7042,3.0515;-.9976,-3.2179,3.0705;-1.0242,-3.1236,4.4589;-3.3913,-3.6115,4.4402;-4.2781,-3.9422,2.5033;-.0365,-3.0909,2.5664;-.0936,-2.9214,4.9977;-4.3299,-3.7785,4.9751;-2.2445,-3.25,6.2376;1.4127,-3.894,-.6257;2.1747,-3.3966,-1.0816;.5207,.2378,-4.7133;-3.0778,-1.7168,.0209;-2.8997,-.9626,1.1801;-1.8372,-.3108,1.5094;-.3592,.5561,1.2098;-.4322,1.4518,-.419;.9876,-.7052,1.3935;-.3421,1.7536,2.6503;-3.8728,-.9497,2.0801;-3.642,-.333,3.3364;-.203,.7576,-1.2456;.3492,2.2334,-.4183;-1.4072,1.946,-.578;1.0132,-1.0671,2.4347;1.9618,-.2457,1.1556;.8616,-1.5484,.6952;-.3996,1.2179,3.6145;.5956,2.3382,2.646;-1.182,2.4691,2.5982;-2.7807,-.7897,3.8494;-4.5565,-.5041,3.9189;-3.4694,.7487,3.2131;4.8413,-.7158,.9885;4.4128,-2.0417,.8463;3.7603,-2.6896,1.8878;3.5534,-1.9988,3.0782;4.035,-.7084,3.277;4.6874,-.074,2.2246;4.5155,-2.537,-.1209;3.3617,-3.697,1.7615;2.6908,-2.5991,4.1009;3.8544,-.2007,4.225;5.0327,.9569,2.343;-.7973,.4585,-4.2911;-1.7766,-.51,-4.4695;-1.4277,-1.7028,-5.0925;-.1406,-1.934,-5.568;.8317,-.962,-5.3669;-1.0434,1.3825,-3.7615;-2.7959,-.3638,-4.1107;-2.4391,-2.7523,-5.2317;.091,-2.8751,-6.0671;1.8538,-1.1484,-5.7006;2.362,-1.9061,5.0439;2.3129,-3.7396,3.9306;-2.2139,-3.6561,-6.0081;-3.443,-2.6651,-4.5529;7.0678,1.1669,-1.4857;6.1073,1.5558,-2.4643;8.4354,1.5028,-1.6799;8.8443,2.1751,-2.8057;9.1615,1.2051,-.9172;9.8999,2.4233,-2.9468;6.5667,2.2326,-3.6287;7.8971,2.5334,-3.7946;5.8458,2.5055,-4.4028;8.2278,3.048,-4.7014;3.3943,3.1486,-3.324;2.2785,3.5603,-4.1111;4.1973,4.1604,-2.7253;3.942,5.4934,-2.9443;5.0261,3.872,-2.0767;4.5746,6.2501,-2.4706;2.0492,4.9464,-4.3322;2.8655,5.8961,-3.7698;1.1978,5.2432,-4.9525;2.6779,6.9594,-3.9438;-4.4767,-2.1936,-.2952;-4.4485,-2.9881,-1.0597;-5.005,-2.5724,.5944;-5.0905,-1.3742,-.7151;-2.1748,-1.4246,-1.1509;-2.3093,-.3838,-1.5002;-1.0986,-1.5516,-.9466;-2.4175,-2.08,-2.0006;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650415976013</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001770742238 0.000324053645 0.020411241248 0.005329950246</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030499350 -0.000623890 -0.000031907 0.000256661 0.000308775 0.000357374 0.000394241 0.000456706 0.000598582 0.000757635 0.000894080 0.001087429 0.001210323 0.001248430 0.001310971 0.001381518 0.001615279 0.001706436 0.001746173 0.001862153 0.002054436 0.002424917 0.002530268 0.002610771 0.002745164 0.003060075 0.003221536 0.003380032 0.003787921 0.003880308 0.004298316 0.004666533 0.004775486 0.004920193 0.005789786 0.005874560 0.006084703 0.006428987 0.006750056 0.007477513 0.007799020 0.008061195 0.008992618 0.009261769 0.009690113 0.010318328 0.010743070 0.011388710 0.011620725 0.011819526 0.012674801 0.013034172 0.013811434 0.013987087 0.014718179 0.015178918 0.015438159 0.015569082 0.015871783 0.016580547 0.017217046 0.017341328 0.018661122 0.018787590 0.019546323 0.020347712 0.021121467 0.021212016 0.022265447 0.023042805 0.024778226 0.025709693 0.026438777 0.026524736 0.027085225 0.028671088 0.029275980 0.030963447 0.032088163 0.033034979 0.033471387 0.034674205 0.035526647 0.036135574 0.038179848 0.038924159 0.040283261 0.040414838 0.041348039 0.044290583 0.045109867 0.046022102 0.046885123 0.049099843 0.050185570 0.050630756 0.050878527 0.051148329 0.052425478 0.052466451 0.052772723 0.052867952 0.054174344 0.054610490 0.055256162 0.055928006 0.056396064 0.056466056 0.056896920 0.058196478 0.059805896 0.060477851 0.061338468 0.061636061 0.062780417 0.063499897 0.064892692 0.065333985 0.066215544 0.067479970 0.068479603 0.069883176 0.072422654 0.073968480 0.074234427 0.075991448 0.077383450 0.083247500 0.084646548 0.086502416 0.086815153 0.087383468 0.090026397 0.090457319 0.092812233 0.094535864 0.095126232 0.096238024 0.096892856 0.097640695 0.098661015 0.099420078 0.100105261 0.102205890 0.102519641 0.102827760 0.103190994 0.103869787 0.104178222 0.106611939 0.107083362 0.107293258 0.108879508 0.109968009 0.111505279 0.112128907 0.112886263 0.114619959 0.116025699 0.118774787 0.120430685 0.121212278 0.121926361 0.123479800 0.125121861 0.126115092 0.126788874 0.131429465 0.134651341 0.135387450 0.142288489 0.143255257 0.146763796 0.146997380 0.149493114 0.151758633 0.154363037 0.155500161 0.156496319 0.160728693 0.161600122 0.173102638 0.173658664 0.178274996 0.183807120 0.184725889 0.188863012 0.189884111 0.192981866 0.193779318 0.197907710 0.199635799 0.204813374 0.206736572 0.206908423 0.209657018 0.211014138 0.214863589 0.216538719 0.217513155 0.220299774 0.224725651 0.226126096 0.231667959 0.234642640 0.235306622 0.235558837 0.244360173 0.255589067 0.256876596 0.262514637 0.269457739 0.279089867 0.282784304 0.286124374 0.291134915 0.295704821 0.304119082 0.305430314 0.306966148 0.312859780 0.316195365 0.316445458 0.321830891 0.329097142 0.331880102 0.349513258 0.351520394 0.354318639 0.355119061 0.359713257 0.362202593 0.362434150 0.382956986 0.385336652 0.391040039 0.410109059 0.424963503 0.429404575 0.451672607 0.468202699 0.472948138 0.475780306 0.482225607 0.486539776 0.489623201 0.508366971 0.513698262 0.534674158 0.565772393 0.572489667 0.591019255 0.593090394 0.605778200 0.607244683 0.642993235 0.645674668 0.647353140 0.673995114 0.676854899 0.684443289 0.691312366 0.692515864 0.699045609 0.703945146 0.716433915 0.741020895 0.751090817 0.757896526 0.764399538 0.772188756 0.778618846 0.810350383 0.812344963 0.814905612 0.821328676 0.821518728 0.826813639 0.831058911 0.835220599 0.836166372 0.845037892 0.845605506 0.847987868 0.857801752 0.864393549 0.864776678 0.872876928 0.880434414 0.884131290 0.889079879 0.891735693 0.900363353 0.903406996 0.920122322 0.923110929 0.932494915 0.934618207 0.964450139 0.975591601 0.985214094 1.000559715 1.016063560 1.026371546 1.040948274 1.049274812 1.057029034 1.067584749 1.086106415 1.088315816 1.103201175 1.105819416 1.112131351 1.119201374 1.123204560 1.135109552 1.141659162 1.170705319 1.173755848 1.180354754 1.185334239 1.188409127 1.194316161 1.223492508 1.226012283 1.271586671 1.299711915 1.318282866 1.327619036 1.331359341 1.332942412 1.335328835 1.339403051 1.342342407 1.344805047 1.358306511 1.375076082 1.382605156 1.383704096 1.408036312 1.419419307 1.433024219 1.551309352 1.660598664 1.774261655</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">145</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34020948" y3="0.03823306" z3="-0.19384996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38517717" y3="0.16459635" z3="0.41770349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64501849" y3="0.43811896" z3="-0.34047091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72333876" y3="1.23122323" z3="-2.2576706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3870336" y3="0.42212688" z3="-1.1846648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72529206" y3="0.83946398" z3="-3.65940455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62597942" y3="1.74304598" z3="-3.12719565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3706251" y3="2.58284646" z3="-4.60418112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55570267" y3="1.24205183" z3="-4.36981122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49057635" y3="2.91684369" z3="-5.16267048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92787063" y3="-0.49131235" z3="-3.44590749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09870675" y3="0.02689505" z3="-1.00390685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40333108" y3="-1.11247365" z3="-2.00936376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93152228" y3="-0.98341845" z3="-1.8369816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10557157" y3="-2.43729759" z3="-1.85979543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14106189" y3="-3.61362055" z3="0.67176484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02680871" y3="-5.26741306" z3="-4.74087836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25298883" y3="-5.00689644" z3="-3.70340032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8441205" y3="-4.30967921" z3="-1.08434052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77401026" y3="-4.59782002" z3="-2.85466438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56797588" y3="-5.09447173" z3="-3.24226879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86433809" y3="-4.74064878" z3="-1.92846557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49060716" y3="-4.26438219" z3="-1.52877188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80737391" y3="-4.52131599" z3="-3.20398404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36746532" y3="-5.41061904" z3="-3.91490353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89895974" y3="-4.78016138" z3="-1.58260343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03058997" y3="-3.85731593" z3="0.23551055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16990835" y3="-3.63926985" z3="0.88072613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05900835" y3="-4.10105174" z3="0.44895355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16372711" y3="-3.50008361" z3="2.34742873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22106793" y3="-3.3062981" z3="5.14472443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36109758" y3="-3.69648882" z3="3.05129936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99496652" y3="-3.2129422" z3="3.06834997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02086972" y3="-3.11689737" z3="4.45668945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38901476" y3="-3.60156182" z3="4.43982527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27805581" y3="-3.93229612" z3="2.50352655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03526319" y3="-3.08529096" z3="2.56346317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09115416" y3="-2.91327179" z3="4.99476979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32873183" y3="-3.7648297" z3="4.9753294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24125831" y3="-3.23858407" z3="6.23597346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41487248" y3="-3.90037027" z3="-0.62761833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17345856" y3="-3.40142451" z3="-1.0835015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51927337" y3="0.23368263" z3="-4.71333683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07438702" y3="-1.71377919" z3="0.01828437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89617338" y3="-0.95831722" z3="1.17639109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83342494" y3="-0.30801229" z3="1.50542487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3552337" y3="0.55982623" z3="1.20655864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42564463" y3="1.4509542" z3="-0.4245257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99245997" y3="-0.69848566" z3="1.39672332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34293664" y3="1.76081124" z3="2.6440235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86999254" y3="-0.94263834" z3="2.07528247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63794695" y3="-0.3240034" z3="3.33097308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19663058" y3="0.75385933" z3="-1.2487313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35961966" y3="2.23090765" z3="-0.4256812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39966888" y3="1.94579116" z3="-0.58563384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0153116" y3="-1.06022498" z3="2.4383566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96760761" y3="-0.23894769" z3="1.16166034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86888358" y3="-1.54224259" z3="0.69859885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40222705" y3="1.2279432" z3="3.60959312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59488092" y3="2.34607978" z3="2.64002058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18327172" y3="2.47558945" z3="2.58788965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77703499" y3="-0.78111294" z3="3.84449481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55301046" y3="-0.49189023" z3="3.91495318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46340117" y3="0.75720771" z3="3.2058908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84354265" y3="-0.72337824" z3="0.98693444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41093546" y3="-2.04775764" z3="0.84336421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75867977" y3="-2.69550756" z3="1.8851003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55650198" y3="-2.00621135" z3="3.07723352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04300041" y3="-0.71775023" z3="3.27762529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69463451" y3="-0.08333892" z3="2.22470437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51064399" y3="-2.54190273" z3="-0.12458317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35675544" y3="-3.70150877" z3="1.7577319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69453455" y3="-2.605703" z3="4.10088294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86669784" y3="-0.21140635" z3="4.22739839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04307448" y3="0.94624507" z3="2.34416603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7996612" y3="0.45217441" z3="-4.29350886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77730287" y3="-0.51698724" z3="-4.4736957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42548235" y3="-1.7089045" z3="-5.09546996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13726842" y3="-1.9376296" z3="-5.56976191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83320369" y3="-0.96524136" z3="-5.36888738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04745512" y3="1.37539099" z3="-3.76340619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79713263" y3="-0.37221631" z3="-4.11675286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43527435" y3="-2.76030503" z3="-5.23731402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09592468" y3="-2.87805465" z3="-6.06900797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85625206" y3="-1.14962859" z3="-5.7006206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37185999" y3="-1.91398748" z3="5.04740824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31117649" y3="-3.74406744" z3="3.92824704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20826619" y3="-3.6639206" z3="-6.01295343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43975566" y3="-2.67460286" z3="-4.55874538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06648047" y3="1.16866715" z3="-1.48498129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10460181" y3="1.55685088" z3="-2.46267229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43352917" y3="1.50842599" z3="-1.67875512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84079975" y3="2.18319173" z3="-2.80334579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16063872" y3="1.21096632" z3="-0.91679601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89593148" y3="2.43407686" z3="-2.9441574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56208484" y3="2.23549316" z3="-3.62621009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89214225" y3="2.53985157" z3="-3.79170312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83997573" y3="2.50668818" z3="-4.39996227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22148699" y3="3.05546928" z3="-4.69794366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38814771" y3="3.14658869" z3="-3.31584361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27163594" y3="3.55767621" z3="-4.10196634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18947165" y3="4.15804093" z3="-2.71435421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93170768" y3="5.49076455" z3="-2.92961672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01869109" y3="3.86967311" z3="-2.06652101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56448316" y3="6.24602787" z3="-2.45602833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03921916" y3="4.9439306" z3="-4.31835605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85375308" y3="5.89364301" z3="-3.75313738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18661999" y3="5.24109879" z3="-4.93685975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66370372" y3="6.95704775" z3="-3.92339515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47469663" y3="-2.18813927" z3="-0.29761519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44891077" y3="-2.98516824" z3="-1.06056028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00456715" y3="-2.56346317" z3="0.59267546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08646822" y3="-1.36809286" z3="-0.71943128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17148457" y3="-1.42334349" z3="-1.15408194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30648178" y3="-0.38390058" z3="-1.50479875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09508512" y3="-1.55078274" z3="-0.95022145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41546335" y3="-2.07935202" z3="-2.00346291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3402,.0382,-.1938;7.3852,.1646,.4177;6.645,.4381,-.3405;4.7233,1.2312,-2.2577;4.387,.4221,-1.1847;2.7253,.8395,-3.6594;3.626,1.743,-3.1272;1.3706,2.5828,-4.6042;1.5557,1.2421,-4.3698;.4906,2.9168,-5.1627;2.9279,-.4913,-3.4459;3.0987,.0269,-1.0039;2.4033,-1.1125,-2.0094;.9315,-.9834,-1.837;3.1056,-2.4373,-1.8598;-.1411,-3.6136,.6718;-.0268,-5.2674,-4.7409;-.253,-5.0069,-3.7034;-.8441,-4.3097,-1.0843;.774,-4.5978,-2.8547;-1.568,-5.0945,-3.2423;-1.8643,-4.7406,-1.9285;.4906,-4.2644,-1.5288;1.8074,-4.5213,-3.204;-2.3675,-5.4106,-3.9149;-2.899,-4.7802,-1.5826;-1.0306,-3.8573,.2355;-2.1699,-3.6393,.8807;-3.059,-4.1011,.449;-2.1637,-3.5001,2.3474;-2.2211,-3.3063,5.1447;-3.3611,-3.6965,3.0513;-.995,-3.2129,3.0683;-1.0209,-3.1169,4.4567;-3.389,-3.6016,4.4398;-4.2781,-3.9323,2.5035;-.0353,-3.0853,2.5635;-.0912,-2.9133,4.9948;-4.3287,-3.7648,4.9753;-2.2413,-3.2386,6.236;1.4149,-3.9004,-.6276;2.1735,-3.4014,-1.0835;.5193,.2337,-4.7133;-3.0744,-1.7138,.0183;-2.8962,-.9583,1.1764;-1.8334,-.308,1.5054;-.3552,.5598,1.2066;-.4256,1.451,-.4245;.9925,-.6985,1.3967;-.3429,1.7608,2.644;-3.87,-.9426,2.0753;-3.6379,-.324,3.331;-.1966,.7539,-1.2487;.3596,2.2309,-.4257;-1.3997,1.9458,-.5856;1.0153,-1.0602,2.4384;1.9676,-.2389,1.1617;.8689,-1.5422,.6986;-.4022,1.2279,3.6096;.5949,2.3461,2.64;-1.1833,2.4756,2.5879;-2.777,-.7811,3.8445;-4.553,-.4919,3.915;-3.4634,.7572,3.2059;4.8435,-.7234,.9869;4.4109,-2.0478,.8434;3.7587,-2.6955,1.8851;3.5565,-2.0062,3.0772;4.043,-.7178,3.2776;4.6946,-.0833,2.2247;4.5106,-2.5419,-.1246;3.3568,-3.7015,1.7577;2.6945,-2.6057,4.1009;3.8667,-.2114,4.2274;5.0431,.9462,2.3442;-.7997,.4522,-4.2935;-1.7773,-.517,-4.4737;-1.4255,-1.7089,-5.0955;-.1373,-1.9376,-5.5698;.8332,-.9652,-5.3689;-1.0475,1.3754,-3.7634;-2.7971,-.3722,-4.1168;-2.4353,-2.7603,-5.2373;.0959,-2.8781,-6.069;1.8563,-1.1496,-5.7006;2.3719,-1.914,5.0474;2.3112,-3.7441,3.9282;-2.2083,-3.6639,-6.013;-3.4398,-2.6746,-4.5587;7.0665,1.1687,-1.485;6.1046,1.5569,-2.4627;8.4335,1.5084,-1.6788;8.8408,2.1832,-2.8033;9.1606,1.211,-.9168;9.8959,2.4341,-2.9442;6.5621,2.2355,-3.6262;7.8921,2.5399,-3.7917;5.84,2.5067,-4.4;8.2215,3.0555,-4.6979;3.3881,3.1466,-3.3158;2.2716,3.5577,-4.102;4.1895,4.158,-2.7144;3.9317,5.4908,-2.9296;5.0187,3.8697,-2.0665;4.5645,6.246,-2.456;2.0392,4.9439,-4.3184;2.8538,5.8936,-3.7531;1.1866,5.2411,-4.9369;2.6637,6.957,-3.9234;-4.4747,-2.1881,-.2976;-4.4489,-2.9852,-1.0606;-5.0046,-2.5635,.5927;-5.0865,-1.3681,-.7194;-2.1715,-1.4233,-1.1541;-2.3065,-.3839,-1.5048;-1.0951,-1.5508,-.9502;-2.4155,-2.0794,-2.0035;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650413197362</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001554650151 0.000308188781 0.022174899576 0.005340368676</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500731 -0.000572716 -0.000036737 0.000258408 0.000311527 0.000357108 0.000394594 0.000460539 0.000599504 0.000758041 0.000894198 0.001089723 0.001210205 0.001248877 0.001311693 0.001381718 0.001621167 0.001706329 0.001752349 0.001863793 0.002054547 0.002424983 0.002535617 0.002613487 0.002750512 0.003060870 0.003225223 0.003382866 0.003788253 0.003879556 0.004302279 0.004668306 0.004774875 0.004928424 0.005790682 0.005874756 0.006085170 0.006429036 0.006752227 0.007479170 0.007820653 0.008069770 0.008999444 0.009273069 0.009692870 0.010319459 0.010747737 0.011388749 0.011622559 0.011825961 0.012674769 0.013034399 0.013811177 0.013999932 0.014725217 0.015192138 0.015438390 0.015569204 0.015872055 0.016583144 0.017221855 0.017342458 0.018661635 0.018793221 0.019550071 0.020348114 0.021122753 0.021224720 0.022267592 0.023044245 0.024781560 0.025731967 0.026442323 0.026535460 0.027105274 0.028677865 0.029278349 0.030963322 0.032099398 0.033104043 0.033475005 0.034772809 0.035526849 0.036139494 0.038203278 0.038925511 0.040284850 0.040420108 0.041349707 0.044290472 0.045111075 0.046033110 0.046890058 0.049100512 0.050188924 0.050635853 0.050878327 0.051148716 0.052425897 0.052466458 0.052772955 0.052868535 0.054178678 0.054618302 0.055258431 0.055938052 0.056396852 0.056471613 0.056899731 0.058197262 0.059817917 0.060487606 0.061338666 0.061656118 0.062784399 0.063536609 0.064894217 0.065376539 0.066215616 0.067480453 0.068518822 0.069894556 0.072425242 0.073988207 0.074235000 0.075991453 0.077384098 0.083248624 0.084652355 0.086509443 0.086816128 0.087386398 0.090032066 0.090494432 0.092812983 0.094536261 0.095126191 0.096238258 0.096895094 0.097640663 0.098662642 0.099421954 0.100105409 0.102214802 0.102537078 0.102837817 0.103197435 0.103872418 0.104197015 0.106621166 0.107135456 0.107296152 0.108895975 0.110001425 0.111511046 0.112130899 0.112887138 0.114628537 0.116029360 0.118781201 0.120434958 0.121218149 0.121945924 0.123481339 0.125122461 0.126115663 0.126791994 0.131432379 0.134650887 0.135387611 0.142288194 0.143288440 0.146766492 0.147000341 0.149502017 0.151757776 0.154370541 0.155501402 0.156494561 0.160731959 0.161606699 0.173103113 0.173664059 0.178287404 0.183808560 0.184728713 0.188863158 0.189885998 0.193006770 0.193784622 0.197908399 0.199636675 0.204814899 0.206738497 0.206911977 0.209657830 0.211022992 0.214868111 0.216539270 0.217518699 0.220300464 0.224729832 0.226126803 0.231668273 0.234644514 0.235306631 0.235562217 0.244361671 0.255589186 0.256877597 0.262520471 0.269464015 0.279090704 0.282790628 0.286124443 0.291142903 0.295705541 0.304119319 0.305433077 0.306974376 0.312920786 0.316195676 0.316453069 0.321831372 0.329098097 0.331880740 0.349513776 0.351520447 0.354324697 0.355120294 0.359714759 0.362224336 0.362437590 0.382994761 0.385338152 0.391044326 0.410126142 0.424963589 0.429444697 0.451801953 0.468212398 0.473144355 0.475780283 0.482245260 0.486541225 0.489628249 0.508367511 0.513741353 0.534676913 0.565772325 0.572490016 0.591028023 0.593119181 0.605818527 0.607268822 0.643238849 0.645688985 0.647402965 0.674008838 0.676916785 0.684465683 0.691313046 0.692520628 0.699050048 0.703945147 0.716473000 0.741024218 0.751092298 0.757910679 0.764515205 0.772188756 0.778622045 0.810362760 0.812357815 0.814944786 0.821331584 0.821520053 0.826904676 0.831064621 0.835222738 0.836172028 0.845041790 0.845617489 0.847998359 0.857806383 0.864394645 0.864776663 0.872892502 0.880489514 0.884139184 0.889081386 0.891738045 0.900368558 0.903406976 0.920122269 0.923110961 0.932512548 0.934621059 0.964451093 0.975591614 0.985251321 1.000583068 1.016109283 1.026384543 1.040948268 1.049274793 1.057035154 1.067602726 1.086108312 1.088333881 1.103205198 1.105852045 1.112131518 1.119205830 1.123205934 1.135116886 1.141850573 1.170708122 1.173762986 1.180459304 1.185346436 1.188444306 1.194317636 1.223492621 1.226151402 1.271607415 1.299726756 1.318350808 1.327618933 1.331401746 1.332944977 1.335330391 1.339498208 1.342355561 1.344806228 1.358312684 1.375076498 1.382627219 1.383706852 1.408036703 1.419426955 1.433024271 1.551314982 1.660606428 1.774306210</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">146</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34163085" y3="0.03529084" z3="-0.1933883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38654535" y3="0.16287331" z3="0.4170106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64550199" y3="0.43583848" z3="-0.34062397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72173513" y3="1.22898866" z3="-2.25560618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38717534" y3="0.41791358" z3="-1.18375179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72430118" y3="0.83546394" z3="-3.658994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62320966" y3="1.7401121" z3="-3.12424479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36406183" y3="2.5804287" z3="-4.5956156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55367393" y3="1.23728032" z3="-4.36844234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48252721" y3="2.91518351" z3="-5.15109495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92866938" y3="-0.49500876" z3="-3.44719763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09941733" y3="0.01868529" z3="-1.00359246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40523561" y3="-1.11951832" z3="-2.01150786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93340934" y3="-0.99190604" z3="-1.83798705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10836359" y3="-2.44432744" z3="-1.86504022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14112429" y3="-3.60892515" z3="0.66914121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0273476" y3="-5.27874713" z3="-4.7387851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25277008" y3="-5.01626598" z3="-3.70167216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8439688" y3="-4.31032243" z3="-1.08461041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77435965" y3="-4.60678463" z3="-2.85365311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56812129" y3="-5.09970569" z3="-3.24069793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86450068" y3="-4.74114506" z3="-1.92799336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49082707" y3="-4.26899606" z3="-1.52876288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80588203" y3="-4.52920489" z3="-3.20263324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36996931" y3="-5.41343472" z3="-3.91312828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90155984" y3="-4.77245707" z3="-1.58256458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0306085" y3="-3.85326728" z3="0.23374729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16951746" y3="-3.63401636" z3="0.87906995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0588178" y3="-4.09618548" z3="0.44837452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16326462" y3="-3.49239338" z3="2.34544697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21905594" y3="-3.29674004" z3="5.14265689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36013109" y3="-3.68820671" z3="3.05004473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99405312" y3="-3.20512872" z3="3.06563403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01930498" y3="-3.10793995" z3="4.45389132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38708725" y3="-3.59259701" z3="4.43858546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27608352" y3="-3.92613531" z3="2.50313716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03323409" y3="-3.08051419" z3="2.56016441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08793332" y3="-2.90651802" z3="4.99172194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32525902" y3="-3.75747529" z3="4.97470948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23796984" y3="-3.22927103" z3="6.23403547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4134582" y3="-3.90234635" z3="-0.62880437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17569374" y3="-3.40787632" z3="-1.08659644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51838433" y3="0.2299737" z3="-4.71209766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07372632" y3="-1.70884151" z3="0.01428419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89333917" y3="-0.95259281" z3="1.17171724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82837028" y3="-0.30472898" z3="1.49945771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35107002" y3="0.56474049" z3="1.20293724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41857522" y3="1.45132752" z3="-0.43063375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99693317" y3="-0.69368013" z3="1.39857712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34390907" y3="1.76961009" z3="2.63752144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86650283" y3="-0.93425959" z3="2.07151325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63270151" y3="-0.31531482" z3="3.32666682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18816662" y3="0.75250193" z3="-1.25257962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36467201" y3="2.23174748" z3="-0.43224453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39252337" y3="1.94546989" z3="-0.59487524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01787554" y3="-1.05315348" z3="2.44072548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.972934" y3="-0.23529421" z3="1.16407579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87372237" y3="-1.53897836" z3="0.70175636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40559876" y3="1.23894522" z3="3.604108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59252903" y3="2.35659772" z3="2.63538606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18526766" y3="2.48277343" z3="2.5769641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77151774" y3="-0.77293287" z3="3.83947823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54697659" y3="-0.48270613" z3="3.91105307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45762675" y3="0.76555579" z3="3.20070027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84644075" y3="-0.72810127" z3="0.98697361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41094696" y3="-2.05142232" z3="0.84184282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75898506" y3="-2.69974484" z3="1.88350293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55987345" y3="-2.01216561" z3="3.07701584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04941142" y3="-0.72522677" z3="3.27877018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70090696" y3="-0.09022814" z3="2.22608837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50775427" y3="-2.54402641" z3="-0.12740504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35478432" y3="-3.70468378" z3="1.75506013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69808377" y3="-2.61159963" z3="4.10089603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87524087" y3="-0.22013592" z3="4.22925042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05168757" y3="0.93841353" z3="2.34674629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80109024" y3="0.44697915" z3="-4.2930234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77769596" y3="-0.52303003" z3="-4.47647819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42427363" y3="-1.7139074" z3="-5.10133998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13550465" y3="-1.9413344" z3="-5.57320708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83385164" y3="-0.96758856" z3="-5.36811281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05072865" y3="1.36908622" z3="-3.76163465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79844715" y3="-0.3800754" z3="-4.12028431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43269091" y3="-2.76595405" z3="-5.24361546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09958054" y3="-2.88102871" z3="-6.07373799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85720803" y3="-1.15067742" z3="-5.69945172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37766674" y3="-1.92085766" z3="5.04829982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31248808" y3="-3.74878857" z3="3.92744814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20307471" y3="-3.66924079" z3="-6.01942149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43838685" y3="-2.6818013" z3="-4.56715753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06512544" y3="1.16721189" z3="-1.484736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1022112" y3="1.55643711" z3="-2.46086211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43136547" y3="1.50747756" z3="-1.67963997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83682968" y3="2.18446979" z3="-2.80366056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15945474" y3="1.20962798" z3="-0.91879966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89146775" y3="2.43577043" z3="-2.94544444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55796139" y3="2.23886614" z3="-3.62335263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88729562" y3="2.54364163" z3="-3.79003853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83520386" y3="2.51238125" z3="-4.39547097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21530035" y3="3.06272365" z3="-4.69542408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38201781" y3="3.14411219" z3="-3.30834015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26301886" y3="3.55600139" z3="-4.09071652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18211033" y3="4.15533116" z3="-2.70502069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91990359" y3="5.48879182" z3="-2.91414564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01333597" y3="3.8664727" z3="-2.05982241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54976543" y3="6.24552507" z3="-2.43632388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02697449" y3="4.94246094" z3="-4.30211855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83989397" y3="5.89202697" z3="-3.73481174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17313743" y3="5.23941445" z3="-4.91901212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64715096" y3="6.95551176" z3="-3.90122025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47392695" y3="-2.18270336" z3="-0.30068879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44766756" y3="-2.9792377" z3="-1.06309846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00331648" y3="-2.55777102" z3="0.5897157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08561688" y3="-1.36287412" z3="-0.72290421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17014948" y3="-1.4215396" z3="-1.15825086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3018764" y3="-0.38104215" z3="-1.50980034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09417534" y3="-1.55042816" z3="-0.95355144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41432413" y3="-2.07831149" z3="-2.00639892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3416,.0353,-.1934;7.3865,.1629,.417;6.6455,.4358,-.3406;4.7217,1.229,-2.2556;4.3872,.4179,-1.1838;2.7243,.8355,-3.659;3.6232,1.7401,-3.1242;1.3641,2.5804,-4.5956;1.5537,1.2373,-4.3684;.4825,2.9152,-5.1511;2.9287,-.495,-3.4472;3.0994,.0187,-1.0036;2.4052,-1.1195,-2.0115;.9334,-.9919,-1.838;3.1084,-2.4443,-1.865;-.1411,-3.6089,.6691;-.0273,-5.2787,-4.7388;-.2528,-5.0163,-3.7017;-.844,-4.3103,-1.0846;.7744,-4.6068,-2.8537;-1.5681,-5.0997,-3.2407;-1.8645,-4.7411,-1.928;.4908,-4.269,-1.5288;1.8059,-4.5292,-3.2026;-2.37,-5.4134,-3.9131;-2.9016,-4.7725,-1.5826;-1.0306,-3.8533,.2337;-2.1695,-3.634,.8791;-3.0588,-4.0962,.4484;-2.1633,-3.4924,2.3454;-2.2191,-3.2967,5.1427;-3.3601,-3.6882,3.05;-.9941,-3.2051,3.0656;-1.0193,-3.1079,4.4539;-3.3871,-3.5926,4.4386;-4.2761,-3.9261,2.5031;-.0332,-3.0805,2.5602;-.0879,-2.9065,4.9917;-4.3253,-3.7575,4.9747;-2.238,-3.2293,6.234;1.4135,-3.9023,-.6288;2.1757,-3.4079,-1.0866;.5184,.23,-4.7121;-3.0737,-1.7088,.0143;-2.8933,-.9526,1.1717;-1.8284,-.3047,1.4995;-.3511,.5647,1.2029;-.4186,1.4513,-.4306;.9969,-.6937,1.3986;-.3439,1.7696,2.6375;-3.8665,-.9343,2.0715;-3.6327,-.3153,3.3267;-.1882,.7525,-1.2526;.3647,2.2317,-.4322;-1.3925,1.9455,-.5949;1.0179,-1.0532,2.4407;1.9729,-.2353,1.1641;.8737,-1.539,.7018;-.4056,1.2389,3.6041;.5925,2.3566,2.6354;-1.1853,2.4828,2.577;-2.7715,-.7729,3.8395;-4.547,-.4827,3.9111;-3.4576,.7656,3.2007;4.8464,-.7281,.987;4.4109,-2.0514,.8418;3.759,-2.6997,1.8835;3.5599,-2.0122,3.077;4.0494,-.7252,3.2788;4.7009,-.0902,2.2261;4.5078,-2.544,-.1274;3.3548,-3.7047,1.7551;2.6981,-2.6116,4.1009;3.8752,-.2201,4.2293;5.0517,.9384,2.3467;-.8011,.447,-4.293;-1.7777,-.523,-4.4765;-1.4243,-1.7139,-5.1013;-.1355,-1.9413,-5.5732;.8339,-.9676,-5.3681;-1.0507,1.3691,-3.7616;-2.7984,-.3801,-4.1203;-2.4327,-2.766,-5.2436;.0996,-2.881,-6.0737;1.8572,-1.1507,-5.6995;2.3777,-1.9209,5.0483;2.3125,-3.7488,3.9274;-2.2031,-3.6692,-6.0194;-3.4384,-2.6818,-4.5672;7.0651,1.1672,-1.4847;6.1022,1.5564,-2.4609;8.4314,1.5075,-1.6796;8.8368,2.1845,-2.8037;9.1595,1.2096,-.9188;9.8915,2.4358,-2.9454;6.558,2.2389,-3.6234;7.8873,2.5436,-3.79;5.8352,2.5124,-4.3955;8.2153,3.0627,-4.6954;3.382,3.1441,-3.3083;2.263,3.556,-4.0907;4.1821,4.1553,-2.705;3.9199,5.4888,-2.9141;5.0133,3.8665,-2.0598;4.5498,6.2455,-2.4363;2.027,4.9425,-4.3021;2.8399,5.892,-3.7348;1.1731,5.2394,-4.919;2.6472,6.9555,-3.9012;-4.4739,-2.1827,-.3007;-4.4477,-2.9792,-1.0631;-5.0033,-2.5578,.5897;-5.0856,-1.3629,-.7229;-2.1701,-1.4215,-1.1583;-2.3019,-.381,-1.5098;-1.0942,-1.5504,-.9536;-2.4143,-2.0783,-2.0064;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650407800116</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001351545435 0.000314105031 0.020349616417 0.005328549368</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500632 -0.000597654 -0.000039343 0.000258605 0.000316391 0.000357389 0.000394741 0.000464388 0.000599257 0.000763874 0.000894819 0.001094089 0.001214481 0.001250060 0.001312173 0.001381601 0.001624822 0.001706317 0.001761914 0.001873178 0.002054527 0.002425005 0.002539756 0.002616741 0.002763026 0.003065603 0.003225591 0.003385558 0.003788195 0.003880059 0.004301416 0.004667919 0.004774744 0.004935557 0.005791366 0.005878733 0.006086430 0.006429320 0.006756345 0.007480662 0.007842056 0.008077898 0.009011961 0.009286619 0.009692325 0.010327750 0.010751605 0.011389326 0.011625315 0.011827125 0.012674789 0.013034469 0.013810983 0.014023909 0.014733424 0.015207220 0.015438413 0.015569062 0.015872432 0.016585676 0.017229492 0.017345747 0.018663839 0.018799485 0.019552270 0.020348742 0.021124300 0.021232763 0.022267608 0.023045797 0.024787010 0.025756546 0.026444207 0.026546394 0.027116361 0.028692426 0.029279482 0.030963969 0.032110950 0.033147399 0.033483760 0.034842611 0.035527399 0.036141137 0.038236209 0.038928199 0.040289211 0.040431227 0.041349513 0.044290398 0.045111184 0.046031908 0.046890817 0.049101230 0.050188653 0.050637723 0.050879256 0.051148701 0.052426568 0.052466489 0.052773690 0.052868620 0.054180173 0.054621734 0.055261689 0.055946211 0.056397879 0.056475834 0.056902905 0.058197221 0.059835209 0.060495109 0.061338697 0.061676329 0.062786561 0.063563336 0.064896546 0.065417709 0.066215928 0.067483517 0.068550487 0.069907207 0.072431465 0.074005205 0.074234946 0.075991310 0.077384502 0.083249418 0.084655883 0.086512279 0.086816911 0.087394697 0.090046427 0.090540968 0.092812826 0.094536477 0.095126160 0.096238286 0.096898262 0.097641255 0.098662768 0.099423309 0.100106618 0.102224748 0.102543983 0.102847404 0.103203715 0.103872658 0.104217443 0.106626216 0.107169067 0.107295968 0.108914450 0.110029186 0.111533316 0.112133227 0.112894033 0.114644067 0.116035387 0.118784192 0.120438145 0.121219135 0.121972797 0.123485073 0.125123438 0.126119258 0.126792833 0.131433486 0.134650693 0.135387603 0.142287825 0.143327009 0.146771170 0.147004225 0.149516026 0.151756441 0.154377290 0.155502545 0.156493993 0.160731394 0.161610351 0.173103109 0.173671683 0.178316278 0.183811442 0.184733136 0.188864788 0.189887129 0.193062966 0.193788319 0.197909759 0.199638004 0.204815109 0.206739425 0.206913584 0.209658359 0.211028336 0.214875667 0.216541172 0.217520425 0.220300655 0.224731613 0.226128153 0.231668953 0.234645250 0.235306644 0.235565077 0.244362966 0.255590836 0.256878489 0.262530409 0.269466977 0.279090708 0.282796362 0.286124498 0.291147906 0.295709557 0.304121322 0.305435524 0.306978129 0.312975547 0.316195885 0.316459900 0.321831794 0.329098367 0.331882167 0.349514735 0.351520976 0.354327990 0.355120662 0.359715072 0.362236841 0.362457879 0.383038359 0.385351845 0.391044916 0.410133341 0.424963562 0.429481564 0.451936209 0.468222767 0.473256531 0.475780356 0.482259445 0.486542237 0.489638403 0.508368439 0.513779431 0.534680216 0.565772700 0.572490239 0.591054633 0.593137488 0.605869935 0.607273388 0.643417252 0.645707690 0.647460915 0.674013113 0.676975483 0.684488215 0.691313109 0.692520660 0.699057597 0.703945172 0.716524494 0.741028091 0.751096671 0.757927441 0.764617242 0.772189270 0.778623178 0.810367884 0.812364668 0.814961745 0.821331588 0.821520048 0.826936598 0.831072183 0.835222961 0.836193741 0.845043446 0.845620144 0.848021757 0.857808536 0.864402045 0.864776658 0.872909585 0.880552244 0.884144097 0.889084432 0.891739007 0.900375892 0.903408585 0.920126231 0.923110958 0.932518043 0.934627805 0.964452706 0.975591675 0.985296431 1.000613793 1.016173074 1.026406248 1.040948270 1.049274789 1.057044312 1.067624642 1.086109600 1.088349142 1.103209699 1.105882633 1.112131528 1.119212560 1.123209782 1.135122056 1.141986425 1.170719422 1.173767029 1.180558134 1.185364098 1.188466891 1.194319790 1.223492858 1.226238061 1.271652983 1.299752637 1.318417534 1.327619203 1.331451599 1.332966866 1.335330452 1.339576574 1.342373004 1.344806328 1.358314162 1.375076683 1.382675581 1.383706699 1.408093837 1.419437705 1.433025081 1.551320959 1.660607415 1.774381608</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">147</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34279825" y3="0.02788115" z3="-0.1941163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38841124" y3="0.15826632" z3="0.41451968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64632337" y3="0.43148268" z3="-0.34189442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71950704" y3="1.22525925" z3="-2.25354639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38728013" y3="0.41151171" z3="-1.1828464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7202478" y3="0.83343633" z3="-3.65357926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61899355" y3="1.73734773" z3="-3.11891945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.358615" y3="2.57651699" z3="-4.58809998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54850378" y3="1.23558736" z3="-4.36075994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47674779" y3="2.91060992" z3="-5.14356919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9269614" y3="-0.497557" z3="-3.44536374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10041239" y3="0.01219118" z3="-1.00182425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40612976" y3="-1.12523385" z3="-2.01023701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93435008" y3="-0.99942137" z3="-1.83486549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11064016" y3="-2.44942047" z3="-1.86634695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13772574" y3="-3.60446054" z3="0.66551177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02697009" y3="-5.28482646" z3="-4.73949814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25252893" y3="-5.01887553" z3="-3.70324432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84201662" y3="-4.30734872" z3="-1.08740533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77621747" y3="-4.61344841" z3="-2.85460126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56864201" y3="-5.0957631" z3="-3.24340872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8640861" y3="-4.73469634" z3="-1.9313404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49344683" y3="-4.27270124" z3="-1.53039016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81020838" y3="-4.54479356" z3="-3.20274269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37042703" y3="-5.40806308" z3="-3.91596946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89985574" y3="-4.76452005" z3="-1.58693399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02755175" y3="-3.84875643" z3="0.230536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16627095" y3="-3.6299696" z3="0.87635869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05565111" y3="-4.09237883" z3="0.44573542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15969305" y3="-3.4881472" z3="2.34270249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.216526" y3="-3.29079732" z3="5.1396645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35728431" y3="-3.68255862" z3="3.04705325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99056553" y3="-3.2008343" z3="3.0629554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01621571" y3="-3.10313145" z3="4.45115278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3849478" y3="-3.58586153" z3="4.43539908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27462363" y3="-3.91823359" z3="2.49975428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03091762" y3="-3.07416037" z3="2.55771014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08623465" y3="-2.89998907" z3="4.98904807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32487533" y3="-3.74759912" z3="4.97131688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23640267" y3="-3.22190544" z3="6.2308146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41914558" y3="-3.91090254" z3="-0.62993159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17854306" y3="-3.41471731" z3="-1.08705281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51526376" y3="0.22585432" z3="-4.7096383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07184047" y3="-1.70498199" z3="0.0117946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88947874" y3="-0.94866539" z3="1.16856711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82338613" y3="-0.3024138" z3="1.49474406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34770985" y3="0.56959491" z3="1.19888706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41170143" y3="1.45125599" z3="-0.43771808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00157322" y3="-0.68555796" z3="1.40170862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34644064" y3="1.77940901" z3="2.62936544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86181203" y3="-0.92860181" z3="2.06897438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62738149" y3="-0.30833109" z3="3.32270956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18289261" y3="0.74797657" z3="-1.25722078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37408702" y3="2.23005547" z3="-0.44199768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38465211" y3="1.94724298" z3="-0.60421119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01992968" y3="-1.0434077" z3="2.44462163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97667966" y3="-0.22600823" z3="1.16867714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88167712" y3="-1.53180733" z3="0.70600664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40922763" y3="1.25236026" z3="3.59782861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58893999" y3="2.36844484" z3="2.62704901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18910512" y3="2.49067076" z3="2.5645048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7681103" y3="-0.76735671" z3="3.83679381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54260865" y3="-0.47240226" z3="3.90681355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44920357" y3="0.77229541" z3="3.19546344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84892659" y3="-0.73530296" z3="0.98664276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41006581" y3="-2.05742205" z3="0.84119088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75762262" y3="-2.70471474" z3="1.88299816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56203562" y3="-2.01746628" z3="3.07738858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05596449" y3="-0.73213813" z3="3.27991516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70745538" y3="-0.09802089" z3="2.22673595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50498042" y3="-2.54971373" z3="-0.12818194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35064577" y3="-3.70853471" z3="1.75411168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69970208" y3="-2.61535917" z3="4.10164376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88526025" y3="-0.22756779" z3="4.23165326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06118588" y3="0.92963747" z3="2.34801263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80598108" y3="0.44110995" z3="-4.29467764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78143414" y3="-0.52934257" z3="-4.48051836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42514385" y3="-1.71972139" z3="-5.10207331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13450765" y3="-1.94529269" z3="-5.57221322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83352918" y3="-0.97129277" z3="-5.36619329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0575937" y3="1.36292233" z3="-3.76405335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80281063" y3="-0.38649052" z3="-4.12744588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43233" y3="-2.77302234" z3="-5.24826858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10235358" y3="-2.88469872" z3="-6.07147512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85791947" y3="-1.15328206" z3="-5.69512169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3847627" y3="-1.92500208" z3="5.05193338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3081664" y3="-3.75084303" z3="3.92564843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20063177" y3="-3.67547491" z3="-6.02387808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43920309" y3="-2.69011678" z3="-4.57322022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06404987" y3="1.16635169" z3="-1.48514197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09948765" y3="1.55581523" z3="-2.45964823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42999901" y3="1.51006844" z3="-1.68052811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83355794" y3="2.19043607" z3="-2.80337907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15923475" y3="1.21096899" z3="-0.92132465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88791618" y3="2.44418335" z3="-2.94554122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55302439" y3="2.24078151" z3="-3.62125451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88215974" y3="2.5493415" z3="-3.78822139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82869313" y3="2.51367665" z3="-4.39229272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20855966" y3="3.06941718" z3="-4.693028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37582698" y3="3.14100539" z3="-3.29960828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25622086" y3="3.55206309" z3="-4.08120564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17439239" y3="4.15227278" z3="-2.69383151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91067385" y3="5.48489183" z3="-2.90045133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00671831" y3="3.86327713" z3="-2.05023226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54162081" y3="6.23969272" z3="-2.42403794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01716403" y3="4.93861656" z3="-4.28807314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82867187" y3="5.88836271" z3="-3.71837779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16164676" y3="5.23606408" z3="-4.90241994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63311382" y3="6.95205358" z3="-3.88087063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47327385" y3="-2.17784586" z3="-0.30058978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45027139" y3="-2.97618458" z3="-1.06235326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00182834" y3="-2.55105265" z3="0.59146587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08482842" y3="-1.35768695" z3="-0.72246389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16990672" y3="-1.41821052" z3="-1.16194851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30327157" y3="-0.37895564" z3="-1.51387627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09363504" y3="-1.54716384" z3="-0.95886194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41606407" y3="-2.0750678" z3="-2.00996585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.0279,-.1941;7.3884,.1583,.4145;6.6463,.4315,-.3419;4.7195,1.2253,-2.2535;4.3873,.4115,-1.1828;2.7202,.8334,-3.6536;3.619,1.7373,-3.1189;1.3586,2.5765,-4.5881;1.5485,1.2356,-4.3608;.4767,2.9106,-5.1436;2.927,-.4976,-3.4454;3.1004,.0122,-1.0018;2.4061,-1.1252,-2.0102;.9344,-.9994,-1.8349;3.1106,-2.4494,-1.8663;-.1377,-3.6045,.6655;-.027,-5.2848,-4.7395;-.2525,-5.0189,-3.7032;-.842,-4.3073,-1.0874;.7762,-4.6134,-2.8546;-1.5686,-5.0958,-3.2434;-1.8641,-4.7347,-1.9313;.4934,-4.2727,-1.5304;1.8102,-4.5448,-3.2027;-2.3704,-5.4081,-3.916;-2.8999,-4.7645,-1.5869;-1.0276,-3.8488,.2305;-2.1663,-3.63,.8764;-3.0557,-4.0924,.4457;-2.1597,-3.4881,2.3427;-2.2165,-3.2908,5.1397;-3.3573,-3.6826,3.0471;-.9906,-3.2008,3.063;-1.0162,-3.1031,4.4512;-3.3849,-3.5859,4.4354;-4.2746,-3.9182,2.4998;-.0309,-3.0742,2.5577;-.0862,-2.9,4.989;-4.3249,-3.7476,4.9713;-2.2364,-3.2219,6.2308;1.4191,-3.9109,-.6299;2.1785,-3.4147,-1.0871;.5153,.2259,-4.7096;-3.0718,-1.705,.0118;-2.8895,-.9487,1.1686;-1.8234,-.3024,1.4947;-.3477,.5696,1.1989;-.4117,1.4513,-.4377;1.0016,-.6856,1.4017;-.3464,1.7794,2.6294;-3.8618,-.9286,2.069;-3.6274,-.3083,3.3227;-.1829,.748,-1.2572;.3741,2.2301,-.442;-1.3847,1.9472,-.6042;1.0199,-1.0434,2.4446;1.9767,-.226,1.1687;.8817,-1.5318,.706;-.4092,1.2524,3.5978;.5889,2.3684,2.627;-1.1891,2.4907,2.5645;-2.7681,-.7674,3.8368;-4.5426,-.4724,3.9068;-3.4492,.7723,3.1955;4.8489,-.7353,.9866;4.4101,-2.0574,.8412;3.7576,-2.7047,1.883;3.562,-2.0175,3.0774;4.056,-.7321,3.2799;4.7075,-.098,2.2267;4.505,-2.5497,-.1282;3.3506,-3.7085,1.7541;2.6997,-2.6154,4.1016;3.8853,-.2276,4.2317;5.0612,.9296,2.348;-.806,.4411,-4.2947;-1.7814,-.5293,-4.4805;-1.4251,-1.7197,-5.1021;-.1345,-1.9453,-5.5722;.8335,-.9713,-5.3662;-1.0576,1.3629,-3.7641;-2.8028,-.3865,-4.1274;-2.4323,-2.773,-5.2483;.1024,-2.8847,-6.0715;1.8579,-1.1533,-5.6951;2.3848,-1.925,5.0519;2.3082,-3.7508,3.9256;-2.2006,-3.6755,-6.0239;-3.4392,-2.6901,-4.5732;7.064,1.1664,-1.4851;6.0995,1.5558,-2.4596;8.43,1.5101,-1.6805;8.8336,2.1904,-2.8034;9.1592,1.211,-.9213;9.8879,2.4442,-2.9455;6.553,2.2408,-3.6213;7.8822,2.5493,-3.7882;5.8287,2.5137,-4.3923;8.2086,3.0694,-4.693;3.3758,3.141,-3.2996;2.2562,3.5521,-4.0812;4.1744,4.1523,-2.6938;3.9107,5.4849,-2.9005;5.0067,3.8633,-2.0502;4.5416,6.2397,-2.424;2.0172,4.9386,-4.2881;2.8287,5.8884,-3.7184;1.1616,5.2361,-4.9024;2.6331,6.9521,-3.8809;-4.4733,-2.1778,-.3006;-4.4503,-2.9762,-1.0624;-5.0018,-2.5511,.5915;-5.0848,-1.3577,-.7225;-2.1699,-1.4182,-1.1619;-2.3033,-.379,-1.5139;-1.0936,-1.5472,-.9589;-2.4161,-2.0751,-2.01;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650401048817</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001649490343 0.000337738265 0.018546373834 0.005347266725</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500641 -0.000678850 -0.000043323 0.000256043 0.000317307 0.000357442 0.000394822 0.000464510 0.000599535 0.000762896 0.000894814 0.001097187 0.001222182 0.001249966 0.001313879 0.001381744 0.001624967 0.001706554 0.001765382 0.001879672 0.002056872 0.002425013 0.002546002 0.002623705 0.002789107 0.003071491 0.003225900 0.003385446 0.003789579 0.003880825 0.004302629 0.004668848 0.004774690 0.004935390 0.005791158 0.005892143 0.006093720 0.006429421 0.006757885 0.007482786 0.007854648 0.008081765 0.009022073 0.009307838 0.009695434 0.010347217 0.010759756 0.011389771 0.011631072 0.011827140 0.012675575 0.013034965 0.013810906 0.014075580 0.014743972 0.015222394 0.015438450 0.015569684 0.015872932 0.016588311 0.017239168 0.017350726 0.018667684 0.018808384 0.019552246 0.020349318 0.021126894 0.021238364 0.022267781 0.023048568 0.024791501 0.025788685 0.026445316 0.026560258 0.027118742 0.028711037 0.029280322 0.030966207 0.032120494 0.033174812 0.033496662 0.034880433 0.035527073 0.036142816 0.038270241 0.038931030 0.040295047 0.040461116 0.041349443 0.044290542 0.045111109 0.046040893 0.046890885 0.049101444 0.050189740 0.050637443 0.050882297 0.051149326 0.052427718 0.052467251 0.052775430 0.052868786 0.054179970 0.054621122 0.055265389 0.055952424 0.056399488 0.056478589 0.056907116 0.058197389 0.059853863 0.060500725 0.061338762 0.061701315 0.062787226 0.063578854 0.064900341 0.065447845 0.066218984 0.067490023 0.068567513 0.069923631 0.072448512 0.074024667 0.074235055 0.075991444 0.077385712 0.083249946 0.084657118 0.086512269 0.086818139 0.087415194 0.090070468 0.090584226 0.092812390 0.094536456 0.095126339 0.096238330 0.096900665 0.097643784 0.098662709 0.099424909 0.100107516 0.102230273 0.102545920 0.102848674 0.103209542 0.103875154 0.104238784 0.106628832 0.107184413 0.107298091 0.108932694 0.110048607 0.111566121 0.112137188 0.112910005 0.114664301 0.116042582 0.118786892 0.120439510 0.121219142 0.122006490 0.123493935 0.125125424 0.126128664 0.126792776 0.131433544 0.134656221 0.135390373 0.142289648 0.143363796 0.146773826 0.147006532 0.149531136 0.151756244 0.154381445 0.155506127 0.156492333 0.160730979 0.161610094 0.173103173 0.173680092 0.178357184 0.183815000 0.184737195 0.188864561 0.189889069 0.193159717 0.193790552 0.197911462 0.199639531 0.204815520 0.206739813 0.206913900 0.209658634 0.211030952 0.214886888 0.216544392 0.217520622 0.220300628 0.224731511 0.226129793 0.231670322 0.234645194 0.235307175 0.235566226 0.244364458 0.255592947 0.256878660 0.262542673 0.269469147 0.279091013 0.282800949 0.286124535 0.291152312 0.295716681 0.304126969 0.305439814 0.306978352 0.313016971 0.316197227 0.316463441 0.321832102 0.329098497 0.331887477 0.349514885 0.351528544 0.354329163 0.355121081 0.359718011 0.362243011 0.362500351 0.383089972 0.385376351 0.391048312 0.410134720 0.424963849 0.429500437 0.452063745 0.468235203 0.473309281 0.475780334 0.482259588 0.486556964 0.489661337 0.508372017 0.513834447 0.534686610 0.565773082 0.572491363 0.591100436 0.593142530 0.605932046 0.607275477 0.643521125 0.645738865 0.647518535 0.674013031 0.677022117 0.684510911 0.691313110 0.692524266 0.699082875 0.703945707 0.716584863 0.741031279 0.751104905 0.757955372 0.764689841 0.772191610 0.778623340 0.810371861 0.812365845 0.814961485 0.821341069 0.821521117 0.826938608 0.831076241 0.835222982 0.836212509 0.845043594 0.845620386 0.848024626 0.857808919 0.864408974 0.864776700 0.872933689 0.880609981 0.884145136 0.889109058 0.891738997 0.900381127 0.903411511 0.920142283 0.923111002 0.932518101 0.934638737 0.964455350 0.975591682 0.985349066 1.000650579 1.016262636 1.026438589 1.040950149 1.049275335 1.057048513 1.067638056 1.086110763 1.088358047 1.103213035 1.105911970 1.112131575 1.119221877 1.123217071 1.135126238 1.142068422 1.170741266 1.173768283 1.180649492 1.185404404 1.188479554 1.194321323 1.223492867 1.226275129 1.271822594 1.299795540 1.318486798 1.327623330 1.331582498 1.333001033 1.335330782 1.339662198 1.342384838 1.344818952 1.358315581 1.375076709 1.382722463 1.383719595 1.408218922 1.419446321 1.433032784 1.551325134 1.660612637 1.774399964</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">148</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34436738" y3="0.02535392" z3="-0.19270072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39013067" y3="0.15677826" z3="0.41428078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64707241" y3="0.42979216" z3="-0.34131382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71790075" y3="1.22295977" z3="-2.25072725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38749182" y3="0.40791944" z3="-1.18077586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71870662" y3="0.8282249" z3="-3.65173606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61592708" y3="1.73365177" z3="-3.11519399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35140724" y3="2.5730393" z3="-4.57847219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54594107" y3="1.22912702" z3="-4.35820043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46829002" y3="2.90720508" z3="-5.13184658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92704293" y3="-0.50236124" z3="-3.44448896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10106876" y3="0.00508669" z3="-0.99994191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40804071" y3="-1.13213898" z3="-2.00949096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93621096" y3="-1.00824854" z3="-1.8322788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11429205" y3="-2.45564297" z3="-1.86783401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13592829" y3="-3.60024444" z3="0.661289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02284992" y3="-5.29306266" z3="-4.73949613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24871761" y3="-5.02486466" z3="-3.7039699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84028002" y3="-4.30489466" z3="-1.0906383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77953999" y3="-4.62116963" z3="-2.85461536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56578919" y3="-5.09523296" z3="-3.24601411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86233198" y3="-4.72950063" z3="-1.93541011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49583353" y3="-4.27666049" z3="-1.53157517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.812993" y3="-4.55515081" z3="-3.2011906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36792371" y3="-5.40562074" z3="-3.91899705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90027601" y3="-4.7503715" z3="-1.59296697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02622181" y3="-3.84331773" z3="0.22623089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16488247" y3="-3.62497374" z3="0.87232136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05382822" y3="-4.08848974" z3="0.44225205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15838171" y3="-3.4823629" z3="2.33860757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21485111" y3="-3.28501593" z3="5.13568163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35534017" y3="-3.67782033" z3="3.04316681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98926455" y3="-3.19458403" z3="3.05878369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01487263" y3="-3.09672863" z3="4.44702879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38276172" y3="-3.58115614" z3="4.43159199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27103344" y3="-3.91637146" z3="2.49627023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02840109" y3="-3.07002983" z3="2.55316405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08372517" y3="-2.89536878" z3="4.9852876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32107329" y3="-3.74570444" z3="4.96754596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23404424" y3="-3.21683489" z3="6.22700179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42040477" y3="-3.91587857" z3="-0.63066684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18264183" y3="-3.42226088" z3="-1.08805774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5132624" y3="0.22069964" z3="-4.70612472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07271001" y3="-1.70035604" z3="0.00885053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88687706" y3="-0.94329221" z3="1.16464948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81844112" y3="-0.29920602" z3="1.48785671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34357988" y3="0.57554745" z3="1.19400569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40539623" y3="1.45084568" z3="-0.44568467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0069606" y3="-0.67744663" z3="1.40528087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34895305" y3="1.79049597" z3="2.62018956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85739789" y3="-0.92080799" z3="2.06729439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61707708" y3="-0.30114723" z3="3.32140208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17563307" y3="0.74574623" z3="-1.26207006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3816365" y3="2.22849934" z3="-0.45161128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37742309" y3="1.94674781" z3="-0.61519768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02075133" y3="-1.0351773" z3="2.44858178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98445171" y3="-0.21850015" z3="1.17676423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88967747" y3="-1.52408915" z3="0.70917641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41362995" y3="1.26670309" z3="3.59035168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58501603" y3="2.38165845" z3="2.6186708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19303279" y3="2.49964652" z3="2.5499298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75561" y3="-0.76123254" z3="3.83189656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53026955" y3="-0.46408484" z3="3.90966549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43878243" y3="0.77885636" z3="3.19361261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85155693" y3="-0.73947077" z3="0.98776138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41071337" y3="-2.06093795" z3="0.84173956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75796662" y3="-2.70798173" z3="1.88367844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56379132" y3="-2.02118686" z3="3.07845981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05962383" y3="-0.73688922" z3="3.28130623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71160748" y3="-0.10308766" z3="2.22821508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50410539" y3="-2.55280991" z3="-0.12817737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34961225" y3="-3.7111645" z3="1.7546977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70182854" y3="-2.61856997" z3="4.10337867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8897046" y3="-0.23251634" z3="4.23289775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06662838" y3="0.92394546" z3="2.34948614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80790199" y3="0.43642488" z3="-4.29239132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78316292" y3="-0.53364974" z3="-4.48154683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42622219" y3="-1.72344535" z3="-5.10638678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13547618" y3="-1.94982962" z3="-5.57264942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83230489" y3="-0.97583766" z3="-5.36245623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06060609" y3="1.35757797" z3="-3.76090749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8057506" y3="-0.39174365" z3="-4.12980165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43325583" y3="-2.77582085" z3="-5.25478924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10226639" y3="-2.88888804" z3="-6.07320286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85712364" y3="-1.15784912" z3="-5.68977631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3836908" y3="-1.92723049" z3="5.05086011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31441938" y3="-3.75465736" z3="3.93117775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19978833" y3="-3.67729371" z3="-6.03145096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44164269" y3="-2.69394009" z3="-4.58190005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06285951" y3="1.16520617" z3="-1.48434833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09704607" y3="1.5548161" z3="-2.45753311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42802644" y3="1.5089882" z3="-1.6810714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82965606" y3="2.18927449" z3="-2.80413889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15851989" y3="1.21089604" z3="-0.92256887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88357557" y3="2.44301991" z3="-2.94743795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54869723" y3="2.24143438" z3="-3.61878434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87705446" y3="2.54896073" z3="-3.78744439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82359379" y3="2.51549172" z3="-4.38857379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20198528" y3="3.07101993" z3="-4.69201508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36973723" y3="3.13751254" z3="-3.29233952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24751415" y3="3.54925459" z3="-4.07014312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16767768" y3="4.14836594" z3="-2.68566127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89940599" y3="5.48206247" z3="-2.88631171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00141345" y3="3.85936576" z3="-2.0438431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.527318" y3="6.23875299" z3="-2.40557847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.00569472" y3="4.93574824" z3="-4.27347779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.81598257" y3="5.88528904" z3="-3.70239603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.14954196" y3="5.23255786" z3="-4.88713119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.61870209" y3="6.94868826" z3="-3.86232426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47461702" y3="-2.17306773" z3="-0.30013804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45216069" y3="-2.9710756" z3="-1.06121589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00130854" y3="-2.54613337" z3="0.59270784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08681909" y3="-1.35316677" z3="-0.72143225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17298143" y3="-1.41540136" z3="-1.16725934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3043372" y3="-0.37495039" z3="-1.51879525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09629567" y3="-1.5461456" z3="-0.96635314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42142429" y3="-2.0724276" z3="-2.0140473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3444,.0254,-.1927;7.3901,.1568,.4143;6.6471,.4298,-.3413;4.7179,1.223,-2.2507;4.3875,.4079,-1.1808;2.7187,.8282,-3.6517;3.6159,1.7337,-3.1152;1.3514,2.573,-4.5785;1.5459,1.2291,-4.3582;.4683,2.9072,-5.1318;2.927,-.5024,-3.4445;3.1011,.0051,-.9999;2.408,-1.1321,-2.0095;.9362,-1.0082,-1.8323;3.1143,-2.4556,-1.8678;-.1359,-3.6002,.6613;-.0228,-5.2931,-4.7395;-.2487,-5.0249,-3.704;-.8403,-4.3049,-1.0906;.7795,-4.6212,-2.8546;-1.5658,-5.0952,-3.246;-1.8623,-4.7295,-1.9354;.4958,-4.2767,-1.5316;1.813,-4.5552,-3.2012;-2.3679,-5.4056,-3.919;-2.9003,-4.7504,-1.593;-1.0262,-3.8433,.2262;-2.1649,-3.625,.8723;-3.0538,-4.0885,.4423;-2.1584,-3.4824,2.3386;-2.2149,-3.285,5.1357;-3.3553,-3.6778,3.0432;-.9893,-3.1946,3.0588;-1.0149,-3.0967,4.447;-3.3828,-3.5812,4.4316;-4.271,-3.9164,2.4963;-.0284,-3.07,2.5532;-.0837,-2.8954,4.9853;-4.3211,-3.7457,4.9675;-2.234,-3.2168,6.227;1.4204,-3.9159,-.6307;2.1826,-3.4223,-1.0881;.5133,.2207,-4.7061;-3.0727,-1.7004,.0089;-2.8869,-.9433,1.1646;-1.8184,-.2992,1.4879;-.3436,.5755,1.194;-.4054,1.4508,-.4457;1.007,-.6774,1.4053;-.349,1.7905,2.6202;-3.8574,-.9208,2.0673;-3.6171,-.3011,3.3214;-.1756,.7457,-1.2621;.3816,2.2285,-.4516;-1.3774,1.9467,-.6152;1.0208,-1.0352,2.4486;1.9845,-.2185,1.1768;.8897,-1.5241,.7092;-.4136,1.2667,3.5904;.585,2.3817,2.6187;-1.193,2.4996,2.5499;-2.7556,-.7612,3.8319;-4.5303,-.4641,3.9097;-3.4388,.7789,3.1936;4.8516,-.7395,.9878;4.4107,-2.0609,.8417;3.758,-2.708,1.8837;3.5638,-2.0212,3.0785;4.0596,-.7369,3.2813;4.7116,-.1031,2.2282;4.5041,-2.5528,-.1282;3.3496,-3.7112,1.7547;2.7018,-2.6186,4.1034;3.8897,-.2325,4.2329;5.0666,.9239,2.3495;-.8079,.4364,-4.2924;-1.7832,-.5336,-4.4815;-1.4262,-1.7234,-5.1064;-.1355,-1.9498,-5.5726;.8323,-.9758,-5.3625;-1.0606,1.3576,-3.7609;-2.8058,-.3917,-4.1298;-2.4333,-2.7758,-5.2548;.1023,-2.8889,-6.0732;1.8571,-1.1578,-5.6898;2.3837,-1.9272,5.0509;2.3144,-3.7547,3.9312;-2.1998,-3.6773,-6.0315;-3.4416,-2.6939,-4.5819;7.0629,1.1652,-1.4843;6.097,1.5548,-2.4575;8.428,1.509,-1.6811;8.8297,2.1893,-2.8041;9.1585,1.2109,-.9226;9.8836,2.443,-2.9474;6.5487,2.2414,-3.6188;7.8771,2.549,-3.7874;5.8236,2.5155,-4.3886;8.202,3.071,-4.692;3.3697,3.1375,-3.2923;2.2475,3.5493,-4.0701;4.1677,4.1484,-2.6857;3.8994,5.4821,-2.8863;5.0014,3.8594,-2.0438;4.5273,6.2388,-2.4056;2.0057,4.9357,-4.2735;2.816,5.8853,-3.7024;1.1495,5.2326,-4.8871;2.6187,6.9487,-3.8623;-4.4746,-2.1731,-.3001;-4.4522,-2.9711,-1.0612;-5.0013,-2.5461,.5927;-5.0868,-1.3532,-.7214;-2.173,-1.4154,-1.1673;-2.3043,-.375,-1.5188;-1.0963,-1.5461,-.9664;-2.4214,-2.0724,-2.014;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650393787089</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002403066990 0.000362419522 0.018534431436 0.005329622650</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500639 -0.000773371 -0.000041291 0.000253676 0.000310675 0.000356292 0.000394971 0.000465500 0.000600243 0.000763824 0.000895046 0.001099622 0.001224698 0.001250266 0.001315733 0.001381986 0.001625218 0.001706854 0.001765248 0.001890167 0.002062846 0.002425845 0.002552837 0.002624036 0.002800154 0.003084112 0.003225901 0.003386172 0.003791439 0.003880432 0.004305736 0.004672403 0.004778744 0.004935317 0.005791693 0.005906763 0.006107654 0.006429472 0.006757961 0.007482250 0.007862229 0.008083758 0.009033492 0.009315071 0.009715693 0.010402007 0.010773827 0.011390934 0.011642322 0.011829833 0.012677216 0.013035449 0.013810736 0.014141551 0.014763354 0.015236187 0.015439257 0.015571834 0.015872888 0.016590065 0.017245333 0.017354606 0.018672144 0.018820889 0.019552082 0.020350546 0.021130144 0.021240506 0.022267749 0.023052674 0.024793817 0.025813781 0.026445279 0.026576314 0.027118844 0.028736719 0.029281492 0.030966228 0.032123858 0.033187665 0.033512189 0.034904300 0.035526755 0.036142558 0.038314706 0.038935173 0.040298773 0.040505145 0.041349351 0.044290936 0.045112217 0.046070737 0.046890989 0.049101799 0.050194141 0.050638788 0.050886435 0.051151403 0.052429727 0.052469088 0.052778283 0.052869739 0.054182702 0.054623175 0.055270765 0.055957026 0.056401770 0.056479052 0.056909765 0.058199849 0.059881128 0.060502449 0.061339127 0.061722985 0.062787151 0.063592782 0.064902937 0.065467323 0.066227046 0.067497658 0.068574582 0.069936245 0.072464222 0.074041380 0.074236247 0.075991784 0.077387173 0.083252369 0.084657871 0.086512226 0.086821643 0.087442811 0.090108733 0.090618175 0.092814429 0.094536646 0.095126612 0.096239090 0.096905221 0.097647715 0.098663204 0.099426711 0.100108998 0.102236559 0.102545960 0.102848661 0.103212754 0.103874430 0.104266609 0.106631159 0.107184529 0.107311399 0.108949643 0.110070411 0.111610839 0.112139785 0.112936882 0.114688823 0.116049070 0.118786953 0.120440226 0.121219219 0.122036328 0.123514227 0.125127708 0.126143030 0.126792927 0.131434767 0.134660137 0.135397445 0.142294690 0.143377589 0.146776353 0.147012429 0.149547618 0.151755324 0.154382968 0.155513678 0.156491506 0.160731229 0.161611451 0.173104683 0.173688284 0.178409258 0.183822145 0.184745359 0.188864966 0.189889230 0.193280338 0.193790289 0.197911363 0.199641272 0.204822360 0.206739766 0.206913729 0.209658909 0.211032955 0.214904406 0.216547704 0.217520472 0.220300857 0.224731727 0.226131871 0.231673080 0.234645251 0.235309240 0.235566607 0.244367927 0.255594922 0.256879046 0.262557974 0.269470882 0.279092088 0.282803472 0.286124614 0.291156304 0.295721004 0.304134352 0.305446608 0.306978272 0.313055361 0.316198414 0.316465057 0.321832205 0.329098510 0.331899112 0.349514973 0.351540357 0.354329641 0.355127222 0.359727814 0.362246423 0.362565394 0.383129854 0.385409572 0.391056676 0.410135297 0.424965020 0.429509051 0.452212927 0.468247971 0.473335160 0.475780393 0.482259564 0.486597875 0.489693635 0.508379336 0.513896566 0.534697239 0.565777490 0.572494375 0.591159999 0.593143277 0.605992425 0.607280317 0.643558026 0.645772560 0.647593970 0.674020462 0.677052895 0.684524900 0.691313575 0.692527118 0.699096002 0.703946534 0.716658530 0.741036844 0.751117696 0.757997007 0.764766088 0.772194486 0.778623354 0.810372620 0.812365838 0.814967556 0.821361627 0.821522089 0.826954782 0.831079778 0.835224139 0.836238523 0.845044439 0.845621442 0.848025246 0.857809119 0.864417488 0.864776720 0.872961758 0.880667392 0.884145124 0.889128531 0.891740015 0.900394275 0.903414660 0.920188702 0.923111189 0.932521750 0.934650080 0.964457993 0.975591885 0.985408329 1.000697617 1.016383615 1.026476004 1.040956054 1.049277631 1.057049731 1.067646140 1.086113246 1.088367902 1.103216994 1.105941837 1.112132408 1.119235989 1.123231871 1.135129914 1.142118852 1.170776409 1.173768267 1.180700341 1.185457292 1.188483004 1.194322024 1.223494063 1.226300012 1.272193294 1.299835369 1.318552099 1.327625419 1.331723450 1.333055685 1.335338095 1.339751329 1.342385820 1.344821636 1.358315602 1.375078442 1.382739350 1.383729046 1.408359674 1.419452721 1.433037605 1.551327774 1.660644043 1.774431249</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">149</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34527875" y3="0.02010197" z3="-0.19132098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3917059" y3="0.15365868" z3="0.41393974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64770341" y3="0.42565593" z3="-0.34113456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71584572" y3="1.21840511" z3="-2.2481969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38739413" y3="0.40195889" z3="-1.1785959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71444151" y3="0.82600638" z3="-3.64522191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61233333" y3="1.73031913" z3="-3.10985207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34695107" y3="2.5689708" z3="-4.57115237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54057604" y3="1.22781337" z3="-4.34906718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46341233" y3="2.90310414" z3="-5.12385998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9245812" y3="-0.50518457" z3="-3.44139922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10180947" y3="-0.00150654" z3="-0.99685294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4095555" y3="-1.13902621" z3="-2.00665175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93770877" y3="-1.01871633" z3="-1.82675567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11856801" y3="-2.46135443" z3="-1.86825684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13298084" y3="-3.59313492" z3="0.655606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01897349" y3="-5.30371656" z3="-4.74013314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24562247" y3="-5.03057481" z3="-3.70586403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8374428" y3="-4.30097862" z3="-1.0950057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78390868" y3="-4.63101374" z3="-2.85552299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56396254" y3="-5.09246023" z3="-3.2499394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86061155" y3="-4.72185835" z3="-1.94064054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49982336" y3="-4.28145469" z3="-1.53376964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81941777" y3="-4.57368524" z3="-3.20028617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3671208" y3="-5.40008212" z3="-3.92339938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89822137" y3="-4.73838506" z3="-1.60005449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02304138" y3="-3.8367654" z3="0.22096848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16154878" y3="-3.62064118" z3="0.86776688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05022273" y3="-4.0846284" z3="0.43730753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1546676" y3="-3.47953013" z3="2.33415475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21062788" y3="-3.28530879" z3="5.13144951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35178791" y3="-3.67589877" z3="3.03864479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98563381" y3="-3.19148858" z3="3.05441551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01095775" y3="-3.09534699" z3="4.44279967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37899001" y3="-3.58077225" z3="4.42714962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26917789" y3="-3.9119383" z3="2.49130567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02647763" y3="-3.06280706" z3="2.54890475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08124525" y3="-2.89174761" z3="4.98101815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31845173" y3="-3.74422761" z3="4.96312841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23003047" y3="-3.21771952" z3="6.22273345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42649512" y3="-3.92537523" z3="-0.63208028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18742382" y3="-3.43086001" z3="-1.08854222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50934719" y3="0.21766646" z3="-4.70195561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07277531" y3="-1.69582235" z3="0.00626681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88230089" y3="-0.93988302" z3="1.16208957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81209254" y3="-0.29749434" z3="1.48230161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34065158" y3="0.58149384" z3="1.18984399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39862449" y3="1.45047848" z3="-0.45375539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01176336" y3="-0.66802356" z3="1.40947357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35310958" y3="1.80280401" z3="2.61081175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84977114" y3="-0.91734496" z3="2.06775032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60764499" y3="-0.29869824" z3="3.32063694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17196684" y3="0.739775" z3="-1.26766654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38891672" y3="2.22657726" z3="-0.46316083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36966768" y3="1.94901843" z3="-0.62514332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02336175" y3="-1.02222475" z3="2.45349766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98711071" y3="-0.20710856" z3="1.18158255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89845007" y3="-1.51645862" z3="0.71522979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41805554" y3="1.28320007" z3="3.58312717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57889951" y3="2.3970205" z3="2.60873453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19922687" y3="2.50893684" z3="2.53589378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74657885" y3="-0.75959708" z3="3.83001634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51971201" y3="-0.46184201" z3="3.90908689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4283341" y3="0.78153256" z3="3.19317436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85358377" y3="-0.74304432" z3="0.9902559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41094273" y3="-2.06386655" z3="0.84474706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75781948" y3="-2.70978385" z3="1.88699633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56540614" y3="-2.0224885" z3="3.08190101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06382099" y3="-0.73901054" z3="3.28466615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71603446" y3="-0.10624655" z3="2.23106642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50327816" y3="-2.55586414" z3="-0.12520724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34781246" y3="-3.71237699" z3="1.75800537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70146917" y3="-2.61813932" z3="4.10604784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89540481" y3="-0.23435323" z3="4.23668022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07278696" y3="0.92036133" z3="2.35248738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81403901" y3="0.43261072" z3="-4.29317951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78911683" y3="-0.53704532" z3="-4.48612057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4301726" y3="-1.72668119" z3="-5.10785565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13691794" y3="-1.95230916" z3="-5.57086904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83049127" y3="-0.97897104" z3="-5.3583179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06820735" y3="1.35384995" z3="-3.76247876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81217007" y3="-0.39374357" z3="-4.1386309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43710238" y3="-2.77905676" z3="-5.26151981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10192782" y3="-2.89134345" z3="-6.06994869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8562676" y3="-1.16121687" z3="-5.68242106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38665925" y3="-1.92585541" z3="5.05512528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30789756" y3="-3.75357215" z3="3.93053837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2020896" y3="-3.67932517" z3="-6.03864096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44691022" y3="-2.69762829" z3="-4.59084783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06184714" y3="1.16191244" z3="-1.48450034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.094658" y3="1.55201575" z3="-2.45615388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42679345" y3="1.50756646" z3="-1.68243941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8268838" y3="2.19177155" z3="-2.80455384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15813426" y3="1.20763349" z3="-0.92563372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88055924" y3="2.44691199" z3="-2.94876091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54450048" y3="2.24132243" z3="-3.61685944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87288354" y3="2.55257951" z3="-3.78608012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81805232" y3="2.51546017" z3="-4.38542083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19651611" y3="3.07630227" z3="-4.69010133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36508825" y3="3.13401441" z3="-3.28469513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24240397" y3="3.5450649" z3="-4.06179941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16223424" y3="4.14512835" z3="-2.6769248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89349614" y3="5.47767299" z3="-2.87678922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99760118" y3="3.85579309" z3="-2.03733536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.52325758" y3="6.23226336" z3="-2.39877076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99786869" y3="4.93192034" z3="-4.261401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.80759006" y3="5.88164271" z3="-3.68940511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.1394962" y3="5.22950609" z3="-4.87179894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.60745155" y3="6.94562195" z3="-3.84583339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47627968" y3="-2.16801894" z3="-0.29753918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45823356" y3="-2.96706969" z3="-1.05874763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99977724" y3="-2.54017837" z3="0.5979606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09004934" y3="-1.34801069" z3="-0.71656919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17681695" y3="-1.41087353" z3="-1.17248077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31037816" y3="-0.37118388" z3="-1.52350649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09976773" y3="-1.54129753" z3="-0.97494026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42870102" y3="-2.06751687" z3="-2.01901143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3453,.0201,-.1913;7.3917,.1537,.4139;6.6477,.4257,-.3411;4.7158,1.2184,-2.2482;4.3874,.402,-1.1786;2.7144,.826,-3.6452;3.6123,1.7303,-3.1099;1.347,2.569,-4.5712;1.5406,1.2278,-4.3491;.4634,2.9031,-5.1239;2.9246,-.5052,-3.4414;3.1018,-.0015,-.9969;2.4096,-1.139,-2.0067;.9377,-1.0187,-1.8268;3.1186,-2.4614,-1.8683;-.133,-3.5931,.6556;-.019,-5.3037,-4.7401;-.2456,-5.0306,-3.7059;-.8374,-4.301,-1.095;.7839,-4.631,-2.8555;-1.564,-5.0925,-3.2499;-1.8606,-4.7219,-1.9406;.4998,-4.2815,-1.5338;1.8194,-4.5737,-3.2003;-2.3671,-5.4001,-3.9234;-2.8982,-4.7384,-1.6001;-1.023,-3.8368,.221;-2.1615,-3.6206,.8678;-3.0502,-4.0846,.4373;-2.1547,-3.4795,2.3342;-2.2106,-3.2853,5.1314;-3.3518,-3.6759,3.0386;-.9856,-3.1915,3.0544;-1.011,-3.0953,4.4428;-3.379,-3.5808,4.4271;-4.2692,-3.9119,2.4913;-.0265,-3.0628,2.5489;-.0812,-2.8917,4.981;-4.3185,-3.7442,4.9631;-2.23,-3.2177,6.2227;1.4265,-3.9254,-.6321;2.1874,-3.4309,-1.0885;.5093,.2177,-4.702;-3.0728,-1.6958,.0063;-2.8823,-.9399,1.1621;-1.8121,-.2975,1.4823;-.3407,.5815,1.1898;-.3986,1.4505,-.4538;1.0118,-.668,1.4095;-.3531,1.8028,2.6108;-3.8498,-.9173,2.0678;-3.6076,-.2987,3.3206;-.172,.7398,-1.2677;.3889,2.2266,-.4632;-1.3697,1.949,-.6251;1.0234,-1.0222,2.4535;1.9871,-.2071,1.1816;.8985,-1.5165,.7152;-.4181,1.2832,3.5831;.5789,2.397,2.6087;-1.1992,2.5089,2.5359;-2.7466,-.7596,3.83;-4.5197,-.4618,3.9091;-3.4283,.7815,3.1932;4.8536,-.743,.9903;4.4109,-2.0639,.8447;3.7578,-2.7098,1.887;3.5654,-2.0225,3.0819;4.0638,-.739,3.2847;4.716,-.1062,2.2311;4.5033,-2.5559,-.1252;3.3478,-3.7124,1.758;2.7015,-2.6181,4.106;3.8954,-.2344,4.2367;5.0728,.9204,2.3525;-.814,.4326,-4.2932;-1.7891,-.537,-4.4861;-1.4302,-1.7267,-5.1079;-.1369,-1.9523,-5.5709;.8305,-.979,-5.3583;-1.0682,1.3538,-3.7625;-2.8122,-.3937,-4.1386;-2.4371,-2.7791,-5.2615;.1019,-2.8913,-6.0699;1.8563,-1.1612,-5.6824;2.3867,-1.9259,5.0551;2.3079,-3.7536,3.9305;-2.2021,-3.6793,-6.0386;-3.4469,-2.6976,-4.5908;7.0618,1.1619,-1.4845;6.0947,1.552,-2.4562;8.4268,1.5076,-1.6824;8.8269,2.1918,-2.8046;9.1581,1.2076,-.9256;9.8806,2.4469,-2.9488;6.5445,2.2413,-3.6169;7.8729,2.5526,-3.7861;5.8181,2.5155,-4.3854;8.1965,3.0763,-4.6901;3.3651,3.134,-3.2847;2.2424,3.5451,-4.0618;4.1622,4.1451,-2.6769;3.8935,5.4777,-2.8768;4.9976,3.8558,-2.0373;4.5233,6.2323,-2.3988;1.9979,4.9319,-4.2614;2.8076,5.8816,-3.6894;1.1395,5.2295,-4.8718;2.6075,6.9456,-3.8458;-4.4763,-2.168,-.2975;-4.4582,-2.9671,-1.0587;-4.9998,-2.5402,.598;-5.09,-1.348,-.7166;-2.1768,-1.4109,-1.1725;-2.3104,-.3712,-1.5235;-1.0998,-1.5413,-.9749;-2.4287,-2.0675,-2.019;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650385300662</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002791536573 0.000397714049 0.018856987169 0.005336833948</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500699 -0.000811127 -0.000047153 0.000251676 0.000302737 0.000356454 0.000395819 0.000465883 0.000600178 0.000766634 0.000903703 0.001102269 0.001224916 0.001250678 0.001316596 0.001383047 0.001630587 0.001707394 0.001768138 0.001893345 0.002087119 0.002425673 0.002560538 0.002624923 0.002799450 0.003088358 0.003226857 0.003391361 0.003792040 0.003883613 0.004309650 0.004684513 0.004781291 0.004936952 0.005791720 0.005929197 0.006125146 0.006431364 0.006758013 0.007482721 0.007864682 0.008083718 0.009047829 0.009314441 0.009749738 0.010477828 0.010800666 0.011392112 0.011657034 0.011840650 0.012679640 0.013035304 0.013811055 0.014198856 0.014789028 0.015249276 0.015443648 0.015576389 0.015873130 0.016589618 0.017244889 0.017359115 0.018678605 0.018836003 0.019551943 0.020352755 0.021132920 0.021240680 0.022268363 0.023057395 0.024794287 0.025835257 0.026445893 0.026598430 0.027118910 0.028759865 0.029282049 0.030966168 0.032123481 0.033191248 0.033522311 0.034914519 0.035526555 0.036142544 0.038349242 0.038937121 0.040305565 0.040579472 0.041349229 0.044292896 0.045111923 0.046112008 0.046891081 0.049101747 0.050195797 0.050645568 0.050891726 0.051156472 0.052432453 0.052472855 0.052783523 0.052871674 0.054190208 0.054626868 0.055274266 0.055960230 0.056403402 0.056480230 0.056911955 0.058201938 0.059902719 0.060503143 0.061339314 0.061746073 0.062787323 0.063601479 0.064904706 0.065475639 0.066236263 0.067502434 0.068576785 0.069944421 0.072486649 0.074058829 0.074241898 0.075994330 0.077389155 0.083253325 0.084657597 0.086512966 0.086830985 0.087470270 0.090152069 0.090640005 0.092821062 0.094537411 0.095127463 0.096242677 0.096910599 0.097653836 0.098663178 0.099429021 0.100111359 0.102239973 0.102546175 0.102854565 0.103212770 0.103875652 0.104292161 0.106631374 0.107185061 0.107340965 0.108956757 0.110086290 0.111648404 0.112140334 0.112975593 0.114705015 0.116054407 0.118787342 0.120441371 0.121219191 0.122063870 0.123544225 0.125131141 0.126162357 0.126793813 0.131437514 0.134666321 0.135398315 0.142297942 0.143381025 0.146777513 0.147022194 0.149558218 0.151755350 0.154383075 0.155524136 0.156493646 0.160731309 0.161619982 0.173106185 0.173694907 0.178461154 0.183828065 0.184755507 0.188865085 0.189891926 0.193440434 0.193790477 0.197912646 0.199644099 0.204831021 0.206739751 0.206913688 0.209659278 0.211033823 0.214925839 0.216550324 0.217520045 0.220300896 0.224732627 0.226134293 0.231676401 0.234645204 0.235313172 0.235566712 0.244374636 0.255594985 0.256879497 0.262576249 0.269471791 0.279097864 0.282804737 0.286124957 0.291163219 0.295723020 0.304142643 0.305450188 0.306979195 0.313082018 0.316198811 0.316465271 0.321832225 0.329098900 0.331914429 0.349518359 0.351561439 0.354336807 0.355147374 0.359748294 0.362248326 0.362635780 0.383157836 0.385448858 0.391082738 0.410142334 0.424974563 0.429512607 0.452358931 0.468252593 0.473346624 0.475782789 0.482270001 0.486650263 0.489744559 0.508386040 0.513974323 0.534704631 0.565793579 0.572497424 0.591235043 0.593144291 0.606050852 0.607286109 0.643560348 0.645809276 0.647668623 0.674035989 0.677071570 0.684530257 0.691314903 0.692551499 0.699112288 0.703948557 0.716718321 0.741044458 0.751128626 0.758046205 0.764816117 0.772196830 0.778623544 0.810372844 0.812371661 0.815008720 0.821401864 0.821523253 0.826990818 0.831084425 0.835227285 0.836262511 0.845044879 0.845623276 0.848027137 0.857809275 0.864421635 0.864777598 0.872994039 0.880716311 0.884145674 0.889140007 0.891744261 0.900399057 0.903421188 0.920239500 0.923115040 0.932532127 0.934659510 0.964462460 0.975592047 0.985471582 1.000744959 1.016519001 1.026514097 1.040972331 1.049283141 1.057049835 1.067649108 1.086118604 1.088372930 1.103221323 1.105962467 1.112134423 1.119255707 1.123257172 1.135133854 1.142147366 1.170821824 1.173768982 1.180723105 1.185561412 1.188486355 1.194322290 1.223494959 1.226306591 1.272697172 1.299891182 1.318619950 1.327625068 1.331931229 1.333170732 1.335359730 1.339830385 1.342386881 1.344834203 1.358315548 1.375088126 1.382749945 1.383746463 1.408503452 1.419456589 1.433038312 1.551327873 1.660774532 1.774437733</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">150</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34637149" y3="0.01625408" z3="-0.18954637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3930737" y3="0.15163373" z3="0.41400568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64827501" y3="0.42379779" z3="-0.34009933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71418116" y3="1.21533824" z3="-2.24523922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38749009" y3="0.39793905" z3="-1.17596833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71179451" y3="0.82035967" z3="-3.64221506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60904224" y3="1.72585269" z3="-3.10573794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3406333" y3="2.56545043" z3="-4.56240589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53738801" y3="1.22123729" z3="-4.34608395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45664674" y3="2.89965401" z3="-5.11430436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92242144" y3="-0.51025231" z3="-3.43838851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10227347" y3="-0.00698565" z3="-0.99377298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41061081" y3="-1.14487095" z3="-2.00308097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93885827" y3="-1.02684321" z3="-1.82065187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12201701" y3="-2.46597523" z3="-1.86615558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12984393" y3="-3.59035401" z3="0.64887431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01456916" y3="-5.30517499" z3="-4.74387723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24172618" y3="-5.0310048" z3="-3.71029104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83514076" y3="-4.2976903" z3="-1.10132194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78760326" y3="-4.63557471" z3="-2.85794151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56115448" y3="-5.08627935" z3="-3.25741572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85858833" y3="-4.71367488" z3="-1.94911635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50279686" y3="-4.28449516" z3="-1.53703732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82341528" y3="-4.5825892" z3="-3.20043522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36396504" y3="-5.39083489" z3="-3.93234799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89795154" y3="-4.7222801" z3="-1.61109274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02079944" y3="-3.83233887" z3="0.21424698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15887562" y3="-3.61759995" z3="0.86232409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04751034" y3="-4.08198192" z3="0.43214383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15154113" y3="-3.47696526" z3="2.32872174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20732873" y3="-3.28500856" z3="5.12612844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34786795" y3="-3.67591874" z3="3.03354551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98270637" y3="-3.1878677" z3="3.04877739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00792322" y3="-3.09310106" z3="4.43726257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37510345" y3="-3.58175479" z3="4.4220642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26317894" y3="-3.91553193" z3="2.48668565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02261606" y3="-3.05950051" z3="2.54266855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07712293" y3="-2.89104616" z3="4.97597109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31313753" y3="-3.74865761" z3="4.95807437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22607521" y3="-3.21910568" z3="6.21756931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42850585" y3="-3.93180071" z3="-0.63361481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19112127" y3="-3.43782113" z3="-1.08863817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50590416" y3="0.2127779" z3="-4.69782213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07366512" y3="-1.6918611" z3="0.0047793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8800272" y3="-0.93638492" z3="1.15986907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80842975" y3="-0.29468886" z3="1.47652437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33862534" y3="0.58821452" z3="1.18423445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39428544" y3="1.44989841" z3="-0.46293848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01530888" y3="-0.65773967" z3="1.41403876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35863281" y3="1.81640959" z3="2.59916594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84494541" y3="-0.9135757" z3="2.0683881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59583355" y3="-0.29699647" z3="3.32206412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16658443" y3="0.73689918" z3="-1.27284321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39743087" y3="2.2236777" z3="-0.47473267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36371876" y3="1.94872106" z3="-0.63806614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02171074" y3="-1.01059667" z3="2.4592293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.99376551" y3="-0.19836081" z3="1.19009345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.90423856" y3="-1.50788109" z3="0.72101073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42422398" y3="1.30205706" z3="3.57437961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57155554" y3="2.4136811" z3="2.59569042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20679957" y3="2.5196301" z3="2.518218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73367168" y3="-0.7617049" z3="3.82726762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.50687021" y3="-0.45721523" z3="3.91479836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.41362067" y3="0.78294283" z3="3.19567639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85517466" y3="-0.74708175" z3="0.99242059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41017366" y3="-2.06735434" z3="0.84810535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75606191" y3="-2.71107927" z3="1.89105992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56465471" y3="-2.02215965" z3="3.08504971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06551527" y3="-0.7395001" z3="3.28666048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71888011" y3="-0.10905014" z3="2.232498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5020249" y3="-2.56081634" z3="-0.12092913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34485358" y3="-3.71330909" z3="1.76369599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70230501" y3="-2.61611032" z3="4.11152242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89849133" y3="-0.23353828" z3="4.23813674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07753514" y3="0.9169679" z3="2.35263431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81753441" y3="0.42942893" z3="-4.29152695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79276135" y3="-0.5393868" z3="-4.48620228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43342355" y3="-1.72924294" z3="-5.10867001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14025932" y3="-1.95675161" z3="-5.56801021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82731896" y3="-0.98396945" z3="-5.35255631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07269624" y3="1.35083772" z3="-3.76222554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81752117" y3="-0.39655952" z3="-4.14060188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44059052" y3="-2.78039315" z3="-5.26343751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09942954" y3="-2.89587553" z3="-6.06734882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85374789" y3="-1.16683946" z3="-5.67464696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38173898" y3="-1.9210647" z3="5.05572273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31796647" y3="-3.75342303" z3="3.94451682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20468504" y3="-3.67972379" z3="-6.04161209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45158114" y3="-2.69944488" z3="-4.59431617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06085539" y3="1.16162656" z3="-1.4832752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09245336" y3="1.55083228" z3="-2.45410381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42526754" y3="1.50799659" z3="-1.68234106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82354501" y3="2.18981842" z3="-2.80539458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15782075" y3="1.20955633" z3="-0.9259618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87691527" y3="2.44524744" z3="-2.95057267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54057931" y3="2.23978226" z3="-3.61514241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86815726" y3="2.54929233" z3="-3.78613929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8132949" y3="2.51363656" z3="-4.38300538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19038657" y3="3.07238022" z3="-4.69068154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36022434" y3="3.12970903" z3="-3.27833156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23575531" y3="3.5416754" z3="-4.05262591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.15757875" y3="4.14021208" z3="-2.66999941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88629548" y3="5.47391901" z3="-2.8656112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99316151" y3="3.85093139" z3="-2.03083503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.51378671" y3="6.23026232" z3="-2.38370495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99117248" y3="4.92800707" z3="-4.25130126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8004948" y3="5.87740277" z3="-3.67826325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.1333908" y3="5.22491918" z3="-4.86247463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.60101945" y3="6.94061602" z3="-3.83437995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4774644" y3="-2.16389448" z3="-0.29549952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46053665" y3="-2.96292885" z3="-1.05579054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99923375" y3="-2.53563318" z3="0.60068389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09144135" y3="-1.34381896" z3="-0.71386369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18050909" y3="-1.40701252" z3="-1.17598989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31322155" y3="-0.36625788" z3="-1.52605195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10271586" y3="-1.53953825" z3="-0.98096889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43496215" y3="-2.06317373" z3="-2.02166158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3464,.0163,-.1895;7.3931,.1516,.414;6.6483,.4238,-.3401;4.7142,1.2153,-2.2452;4.3875,.3979,-1.176;2.7118,.8204,-3.6422;3.609,1.7259,-3.1057;1.3406,2.5655,-4.5624;1.5374,1.2212,-4.3461;.4566,2.8997,-5.1143;2.9224,-.5103,-3.4384;3.1023,-.007,-.9938;2.4106,-1.1449,-2.0031;.9389,-1.0268,-1.8207;3.122,-2.466,-1.8662;-.1298,-3.5904,.6489;-.0146,-5.3052,-4.7439;-.2417,-5.031,-3.7103;-.8351,-4.2977,-1.1013;.7876,-4.6356,-2.8579;-1.5612,-5.0863,-3.2574;-1.8586,-4.7137,-1.9491;.5028,-4.2845,-1.537;1.8234,-4.5826,-3.2004;-2.364,-5.3908,-3.9323;-2.898,-4.7223,-1.6111;-1.0208,-3.8323,.2142;-2.1589,-3.6176,.8623;-3.0475,-4.082,.4321;-2.1515,-3.477,2.3287;-2.2073,-3.285,5.1261;-3.3479,-3.6759,3.0335;-.9827,-3.1879,3.0488;-1.0079,-3.0931,4.4373;-3.3751,-3.5818,4.4221;-4.2632,-3.9155,2.4867;-.0226,-3.0595,2.5427;-.0771,-2.891,4.976;-4.3131,-3.7487,4.9581;-2.2261,-3.2191,6.2176;1.4285,-3.9318,-.6336;2.1911,-3.4378,-1.0886;.5059,.2128,-4.6978;-3.0737,-1.6919,.0048;-2.88,-.9364,1.1599;-1.8084,-.2947,1.4765;-.3386,.5882,1.1842;-.3943,1.4499,-.4629;1.0153,-.6577,1.414;-.3586,1.8164,2.5992;-3.8449,-.9136,2.0684;-3.5958,-.297,3.3221;-.1666,.7369,-1.2728;.3974,2.2237,-.4747;-1.3637,1.9487,-.6381;1.0217,-1.0106,2.4592;1.9938,-.1984,1.1901;.9042,-1.5079,.721;-.4242,1.3021,3.5744;.5716,2.4137,2.5957;-1.2068,2.5196,2.5182;-2.7337,-.7617,3.8273;-4.5069,-.4572,3.9148;-3.4136,.7829,3.1957;4.8552,-.7471,.9924;4.4102,-2.0674,.8481;3.7561,-2.7111,1.8911;3.5647,-2.0222,3.085;4.0655,-.7395,3.2867;4.7189,-.1091,2.2325;4.502,-2.5608,-.1209;3.3449,-3.7133,1.7637;2.7023,-2.6161,4.1115;3.8985,-.2335,4.2381;5.0775,.917,2.3526;-.8175,.4294,-4.2915;-1.7928,-.5394,-4.4862;-1.4334,-1.7292,-5.1087;-.1403,-1.9568,-5.568;.8273,-.984,-5.3526;-1.0727,1.3508,-3.7622;-2.8175,-.3966,-4.1406;-2.4406,-2.7804,-5.2634;.0994,-2.8959,-6.0673;1.8537,-1.1668,-5.6746;2.3817,-1.9211,5.0557;2.318,-3.7534,3.9445;-2.2047,-3.6797,-6.0416;-3.4516,-2.6994,-4.5943;7.0609,1.1616,-1.4833;6.0925,1.5508,-2.4541;8.4253,1.508,-1.6823;8.8235,2.1898,-2.8054;9.1578,1.2096,-.926;9.8769,2.4452,-2.9506;6.5406,2.2398,-3.6151;7.8682,2.5493,-3.7861;5.8133,2.5136,-4.383;8.1904,3.0724,-4.6907;3.3602,3.1297,-3.2783;2.2358,3.5417,-4.0526;4.1576,4.1402,-2.67;3.8863,5.4739,-2.8656;4.9932,3.8509,-2.0308;4.5138,6.2303,-2.3837;1.9912,4.928,-4.2513;2.8005,5.8774,-3.6783;1.1334,5.2249,-4.8625;2.601,6.9406,-3.8344;-4.4775,-2.1639,-.2955;-4.4605,-2.9629,-1.0558;-4.9992,-2.5356,.6007;-5.0914,-1.3438,-.7139;-2.1805,-1.407,-1.176;-2.3132,-.3663,-1.5261;-1.1027,-1.5395,-.981;-2.435,-2.0632,-2.0217;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650375043051</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002943270104 0.000410807829 0.020201267835 0.005342722609</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500661 -0.000805808 -0.000052978 0.000251864 0.000296434 0.000356926 0.000395191 0.000466919 0.000600123 0.000770040 0.000905189 0.001101756 0.001230084 0.001256576 0.001316461 0.001382891 0.001636346 0.001707467 0.001773849 0.001894572 0.002090240 0.002425721 0.002569094 0.002624514 0.002802470 0.003089379 0.003226081 0.003400819 0.003792244 0.003894822 0.004310154 0.004682070 0.004790076 0.004946258 0.005793499 0.005934479 0.006135729 0.006437548 0.006760367 0.007482705 0.007866031 0.008084142 0.009051221 0.009323153 0.009782143 0.010556228 0.010838023 0.011392929 0.011668191 0.011869225 0.012679304 0.013035638 0.013815390 0.014224057 0.014824717 0.015255815 0.015450516 0.015581261 0.015876041 0.016590057 0.017244862 0.017361547 0.018686480 0.018861608 0.019551994 0.020356718 0.021134636 0.021241719 0.022272603 0.023063442 0.024794313 0.025844306 0.026447014 0.026624381 0.027118948 0.028779649 0.029283099 0.030976241 0.032127884 0.033191058 0.033529007 0.034925792 0.035526047 0.036142481 0.038385515 0.038938582 0.040308040 0.040671335 0.041350298 0.044296563 0.045112603 0.046157973 0.046892980 0.049101732 0.050195912 0.050653245 0.050895329 0.051161386 0.052434748 0.052476988 0.052790875 0.052874183 0.054202802 0.054630361 0.055276025 0.055961329 0.056404054 0.056480478 0.056912392 0.058204144 0.059920110 0.060503095 0.061339477 0.061764339 0.062787239 0.063613812 0.064904354 0.065476380 0.066243146 0.067502271 0.068576513 0.069945737 0.072493634 0.074075373 0.074252806 0.075996851 0.077391928 0.083254420 0.084657707 0.086515373 0.086846947 0.087488644 0.090199136 0.090650368 0.092840792 0.094540294 0.095127751 0.096249488 0.096916827 0.097663029 0.098663524 0.099432810 0.100114451 0.102242679 0.102548377 0.102873953 0.103217074 0.103880129 0.104309831 0.106631336 0.107193317 0.107392950 0.108961022 0.110106704 0.111671618 0.112140316 0.113016305 0.114709708 0.116057665 0.118788962 0.120442922 0.121219385 0.122082510 0.123592171 0.125134337 0.126180011 0.126795461 0.131437706 0.134665736 0.135398238 0.142299722 0.143382289 0.146778930 0.147044009 0.149561192 0.151760120 0.154383099 0.155538816 0.156499174 0.160736291 0.161629713 0.173116270 0.173699217 0.178504557 0.183840345 0.184773662 0.188865171 0.189892206 0.193562013 0.193795542 0.197925030 0.199647293 0.204853254 0.206740057 0.206914073 0.209660186 0.211034768 0.214956113 0.216552744 0.217519778 0.220302294 0.224732510 0.226134879 0.231682159 0.234646472 0.235316935 0.235566626 0.244387158 0.255595342 0.256880506 0.262590292 0.269473033 0.279111189 0.282805726 0.286125831 0.291172389 0.295722956 0.304147956 0.305452302 0.306990906 0.313114675 0.316199134 0.316465390 0.321834324 0.329098906 0.331927546 0.349531180 0.351576072 0.354359988 0.355186200 0.359772269 0.362251303 0.362698522 0.383179251 0.385476480 0.391147974 0.410153965 0.424998251 0.429512737 0.452511252 0.468253379 0.473357164 0.475796022 0.482283677 0.486696459 0.489796689 0.508388768 0.514037453 0.534709199 0.565823250 0.572499874 0.591287991 0.593149109 0.606090619 0.607310150 0.643562731 0.645837428 0.647768700 0.674061181 0.677079282 0.684530470 0.691317163 0.692561878 0.699112936 0.703950587 0.716764529 0.741059747 0.751137808 0.758099467 0.764878548 0.772196978 0.778623946 0.810372832 0.812380858 0.815072990 0.821473590 0.821529520 0.827075599 0.831099656 0.835237241 0.836289727 0.845046572 0.845626697 0.848027192 0.857811344 0.864425195 0.864780018 0.873018712 0.880760340 0.884146721 0.889140836 0.891749167 0.900408518 0.903428958 0.920283778 0.923124468 0.932536672 0.934666517 0.964464273 0.975593569 0.985522923 1.000793067 1.016668009 1.026537409 1.040999959 1.049292572 1.057051340 1.067650294 1.086130149 1.088376344 1.103226786 1.105980377 1.112138152 1.119286704 1.123292122 1.135139259 1.142170365 1.170866111 1.173774221 1.180724316 1.185683724 1.188486657 1.194325917 1.223496486 1.226325917 1.273268276 1.299940195 1.318670177 1.327630324 1.332063588 1.333296394 1.335401996 1.339880778 1.342415640 1.344838256 1.358324819 1.375131270 1.382754257 1.383746343 1.408544924 1.419456548 1.433043469 1.551327895 1.661073207 1.774439942</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">151</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34654011" y3="0.01429238" z3="-0.18645957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3934855" y3="0.15019338" z3="0.41581412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64807129" y3="0.42062408" z3="-0.33848101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71255084" y3="1.21100199" z3="-2.24254544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38691463" y3="0.39403969" z3="-1.17288938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70865023" y3="0.8179799" z3="-3.6363624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60659924" y3="1.72257356" z3="-3.10115181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33734588" y3="2.56175376" z3="-4.5555855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53303166" y3="1.21992399" z3="-4.33720804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45258208" y3="2.89626223" z3="-5.10617651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92122108" y3="-0.51343821" z3="-3.43569913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10212902" y3="-0.01245648" z3="-0.99046678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41244286" y3="-1.15137436" z3="-2.00042195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94047029" y3="-1.0373294" z3="-1.81622581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12701918" y3="-2.47105097" z3="-1.86584007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12868789" y3="-3.58408952" z3="0.64286785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00836957" y3="-5.31425924" z3="-4.74532798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23701488" y3="-5.03555757" z3="-3.71291832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83371565" y3="-4.2924078" z3="-1.10668042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79194032" y3="-4.64191086" z3="-2.85963728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55763737" y3="-5.08418196" z3="-3.2621122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85681589" y3="-4.70624662" z3="-1.95539949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50535902" y3="-4.28611801" z3="-1.54006049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82921025" y3="-4.59513095" z3="-3.20026214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36029656" y3="-5.38787555" z3="-3.93746411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89598998" y3="-4.71159461" z3="-1.61953561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01946649" y3="-3.82575172" z3="0.20825758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15732437" y3="-3.6138041" z3="0.85713829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0454459" y3="-4.07875036" z3="0.42676809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1486376" y3="-3.4757919" z3="2.32382095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20108376" y3="-3.29020153" z3="5.12183428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34392523" y3="-3.67803442" z3="3.02942437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97941726" y3="-3.18601015" z3="3.04329825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00327035" y3="-3.09397078" z3="4.4320669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36937233" y3="-3.58722958" z3="4.41831309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26137876" y3="-3.91540649" z3="2.48262036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02155578" y3="-3.05218579" z3="2.53656434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07408969" y3="-2.88850364" z3="4.97015869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30719102" y3="-3.75573992" z3="4.95506604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21903298" y3="-3.22587988" z3="6.21336552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43160731" y3="-3.93698674" z3="-0.6352768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19545013" y3="-3.4441782" z3="-1.08916664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50229762" y3="0.21047167" z3="-4.69209573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0751604" y3="-1.68784907" z3="0.00224595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87641652" y3="-0.93345865" z3="1.15756996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80264012" y3="-0.29304117" z3="1.47020778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33605151" y3="0.59389092" z3="1.17828405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.38813723" y3="1.44858722" z3="-0.47299027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01903171" y3="-0.6496924" z3="1.41741092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36450785" y3="1.83008333" z3="2.58625568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.83734234" y3="-0.91116025" z3="2.07056113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.58349638" y3="-0.29752148" z3="3.32424929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16340527" y3="0.7307274" z3="-1.28087178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.40189967" y3="2.2215655" z3="-0.4872166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.35700102" y3="1.94960742" z3="-0.64976598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02322371" y3="-0.99857737" z3="2.46346995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.99550185" y3="-0.18891634" z3="1.19425707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.9111631" y3="-1.50184332" z3="0.72649348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4315546" y3="1.32104432" z3="3.56418617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56283026" y3="2.43126696" z3="2.58270755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21528827" y3="2.52918527" z3="2.49801674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.71764785" y3="-0.76023657" z3="3.82409087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.48998677" y3="-0.46273239" z3="3.92093452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.40584792" y3="0.78258094" z3="3.1990704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85618807" y3="-0.74728995" z3="0.99676563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41037936" y3="-2.06730414" z3="0.85367708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7571352" y3="-2.7100867" z3="1.89791069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56721955" y3="-2.02032689" z3="3.09196123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06830616" y3="-0.73777389" z3="3.29192264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72124503" y3="-0.1083768" z3="2.23670785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49997444" y3="-2.56083295" z3="-0.11621081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34492593" y3="-3.71206778" z3="1.77112015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70271858" y3="-2.61261645" z3="4.11749329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.9009185" y3="-0.23086776" z3="4.24263435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07992937" y3="0.91761869" z3="2.35565596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82222777" y3="0.42763889" z3="-4.28879627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79814233" y3="-0.54014515" z3="-4.48770751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43848774" y3="-1.72984929" z3="-5.10965641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14368302" y3="-1.95794007" z3="-5.5660185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82443533" y3="-0.98650709" z3="-5.34767846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07763433" y3="1.34908192" z3="-3.75852774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82247924" y3="-0.3949872" z3="-4.1451146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44662647" y3="-2.77986911" z3="-5.26966058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09553786" y3="-2.89702013" z3="-6.06496291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85110278" y3="-1.17067481" z3="-5.66713686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3827112" y3="-1.91539257" z3="5.06079982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31312423" y3="-3.75040655" z3="3.94788568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21055758" y3="-3.67807287" z3="-6.04876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45829076" y3="-2.69888756" z3="-4.60153733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05947068" y3="1.15607732" z3="-1.48291659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0902372" y3="1.54544011" z3="-2.4528334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42357744" y3="1.50287463" z3="-1.68335441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82084556" y3="2.18773297" z3="-2.80615173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1567782" y3="1.20440012" z3="-0.92771239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87398557" y3="2.44389542" z3="-2.95228767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.536973" y3="2.23556852" z3="-3.61409935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86472309" y3="2.54795431" z3="-3.78580429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80876758" y3="2.50962121" z3="-4.38101666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18611616" y3="3.07274019" z3="-4.69022923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35715838" y3="3.12646453" z3="-3.27190945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23217663" y3="3.53805824" z3="-4.04537211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1545321" y3="4.13689945" z3="-2.66350485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88326595" y3="5.46977562" z3="-2.85897105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99182094" y3="3.8467795" z3="-2.02671243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.51302914" y3="6.22394877" z3="-2.38035444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.98498359" y3="4.92552262" z3="-4.24040624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.79486733" y3="5.87457699" z3="-3.66797537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.12489223" y3="5.22366327" z3="-4.84819098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.59264982" y3="6.93899238" z3="-3.82082846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48023651" y3="-2.15981268" z3="-0.29330017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46661671" y3="-2.96108866" z3="-1.05221153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.9997495" y3="-2.52905061" z3="0.60577098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09502999" y3="-1.34047084" z3="-0.71188565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18521307" y3="-1.40357602" z3="-1.18126015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3191922" y3="-0.36326054" z3="-1.53095033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10736502" y3="-1.53570775" z3="-0.98894448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44287214" y3="-2.05957598" z3="-2.02648813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3465,.0143,-.1865;7.3935,.1502,.4158;6.6481,.4206,-.3385;4.7126,1.211,-2.2425;4.3869,.394,-1.1729;2.7087,.818,-3.6364;3.6066,1.7226,-3.1012;1.3373,2.5618,-4.5556;1.533,1.2199,-4.3372;.4526,2.8963,-5.1062;2.9212,-.5134,-3.4357;3.1021,-.0125,-.9905;2.4124,-1.1514,-2.0004;.9405,-1.0373,-1.8162;3.127,-2.4711,-1.8658;-.1287,-3.5841,.6429;-.0084,-5.3143,-4.7453;-.237,-5.0356,-3.7129;-.8337,-4.2924,-1.1067;.7919,-4.6419,-2.8596;-1.5576,-5.0842,-3.2621;-1.8568,-4.7062,-1.9554;.5054,-4.2861,-1.5401;1.8292,-4.5951,-3.2003;-2.3603,-5.3879,-3.9375;-2.896,-4.7116,-1.6195;-1.0195,-3.8258,.2083;-2.1573,-3.6138,.8571;-3.0454,-4.0788,.4268;-2.1486,-3.4758,2.3238;-2.2011,-3.2902,5.1218;-3.3439,-3.678,3.0294;-.9794,-3.186,3.0433;-1.0033,-3.094,4.4321;-3.3694,-3.5872,4.4183;-4.2614,-3.9154,2.4826;-.0216,-3.0522,2.5366;-.0741,-2.8885,4.9702;-4.3072,-3.7557,4.9551;-2.219,-3.2259,6.2134;1.4316,-3.937,-.6353;2.1955,-3.4442,-1.0892;.5023,.2105,-4.6921;-3.0752,-1.6878,.0022;-2.8764,-.9335,1.1576;-1.8026,-.293,1.4702;-.3361,.5939,1.1783;-.3881,1.4486,-.473;1.019,-.6497,1.4174;-.3645,1.8301,2.5863;-3.8373,-.9112,2.0706;-3.5835,-.2975,3.3242;-.1634,.7307,-1.2809;.4019,2.2216,-.4872;-1.357,1.9496,-.6498;1.0232,-.9986,2.4635;1.9955,-.1889,1.1943;.9112,-1.5018,.7265;-.4316,1.321,3.5642;.5628,2.4313,2.5827;-1.2153,2.5292,2.498;-2.7176,-.7602,3.8241;-4.49,-.4627,3.9209;-3.4058,.7826,3.1991;4.8562,-.7473,.9968;4.4104,-2.0673,.8537;3.7571,-2.7101,1.8979;3.5672,-2.0203,3.092;4.0683,-.7378,3.2919;4.7212,-.1084,2.2367;4.5,-2.5608,-.1162;3.3449,-3.7121,1.7711;2.7027,-2.6126,4.1175;3.9009,-.2309,4.2426;5.0799,.9176,2.3557;-.8222,.4276,-4.2888;-1.7981,-.5401,-4.4877;-1.4385,-1.7298,-5.1097;-.1437,-1.9579,-5.566;.8244,-.9865,-5.3477;-1.0776,1.3491,-3.7585;-2.8225,-.395,-4.1451;-2.4466,-2.7799,-5.2697;.0955,-2.897,-6.065;1.8511,-1.1707,-5.6671;2.3827,-1.9154,5.0608;2.3131,-3.7504,3.9479;-2.2106,-3.6781,-6.0488;-3.4583,-2.6989,-4.6015;7.0595,1.1561,-1.4829;6.0902,1.5454,-2.4528;8.4236,1.5029,-1.6834;8.8208,2.1877,-2.8062;9.1568,1.2044,-.9277;9.874,2.4439,-2.9523;6.537,2.2356,-3.6141;7.8647,2.548,-3.7858;5.8088,2.5096,-4.381;8.1861,3.0727,-4.6902;3.3572,3.1265,-3.2719;2.2322,3.5381,-4.0454;4.1545,4.1369,-2.6635;3.8833,5.4698,-2.859;4.9918,3.8468,-2.0267;4.513,6.2239,-2.3804;1.985,4.9255,-4.2404;2.7949,5.8746,-3.668;1.1249,5.2237,-4.8482;2.5926,6.939,-3.8208;-4.4802,-2.1598,-.2933;-4.4666,-2.9611,-1.0522;-4.9997,-2.5291,.6058;-5.095,-1.3405,-.7119;-2.1852,-1.4036,-1.1813;-2.3192,-.3633,-1.531;-1.1074,-1.5357,-.9889;-2.4429,-2.0596,-2.0265;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650364017956</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002612455374 0.000402537975 0.018690562212 0.005326573400</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030500769 -0.000776768 -0.000058790 0.000251794 0.000289246 0.000359072 0.000395205 0.000467574 0.000600066 0.000770079 0.000905889 0.001102439 0.001231748 0.001256709 0.001330143 0.001382375 0.001639024 0.001707418 0.001772978 0.001903163 0.002090336 0.002426492 0.002571792 0.002627195 0.002808248 0.003089257 0.003225885 0.003405947 0.003795756 0.003911272 0.004311572 0.004681958 0.004785938 0.004959803 0.005795962 0.005938559 0.006141362 0.006450213 0.006764621 0.007484052 0.007866605 0.008087628 0.009053358 0.009345372 0.009804205 0.010604031 0.010862082 0.011396628 0.011672381 0.011893729 0.012680163 0.013035866 0.013825355 0.014229532 0.014849196 0.015257391 0.015462749 0.015584530 0.015881201 0.016595160 0.017245098 0.017366412 0.018698208 0.018899988 0.019552054 0.020361558 0.021134795 0.021245722 0.022282091 0.023067392 0.024794370 0.025848582 0.026453090 0.026655073 0.027118902 0.028795466 0.029283981 0.031010763 0.032150735 0.033190982 0.033536579 0.034939861 0.035525599 0.036142473 0.038410750 0.038939812 0.040312730 0.040761485 0.041356277 0.044301456 0.045118286 0.046180410 0.046897025 0.049101739 0.050196766 0.050662731 0.050897529 0.051165883 0.052436686 0.052480717 0.052800737 0.052876218 0.054213576 0.054630450 0.055276004 0.055962120 0.056403971 0.056482323 0.056912826 0.058203555 0.059922875 0.060503227 0.061339426 0.061775476 0.062791768 0.063620266 0.064905084 0.065476341 0.066248902 0.067502743 0.068576322 0.069946257 0.072498407 0.074089014 0.074266830 0.076003205 0.077392803 0.083253984 0.084658016 0.086528833 0.086865219 0.087497869 0.090226866 0.090656776 0.092867571 0.094544963 0.095127795 0.096260587 0.096921620 0.097669407 0.098669875 0.099438417 0.100116692 0.102242926 0.102550984 0.102898313 0.103237349 0.103887008 0.104312504 0.106632701 0.107202807 0.107449045 0.108962658 0.110120831 0.111681904 0.112144101 0.113050621 0.114709061 0.116060698 0.118790908 0.120447197 0.121219638 0.122097877 0.123643928 0.125139665 0.126186331 0.126794712 0.131439479 0.134669097 0.135407356 0.142298940 0.143386942 0.146779553 0.147070688 0.149561552 0.151764530 0.154383824 0.155546748 0.156511959 0.160754605 0.161637756 0.173130227 0.173700756 0.178541012 0.183853024 0.184798900 0.188866258 0.189898015 0.193655008 0.193801162 0.197955342 0.199648908 0.204855443 0.206740269 0.206913994 0.209661880 0.211035654 0.214993269 0.216558632 0.217519765 0.220303822 0.224733628 0.226134857 0.231689290 0.234649963 0.235317936 0.235566605 0.244402634 0.255596943 0.256881183 0.262607396 0.269473468 0.279147057 0.282805822 0.286127473 0.291185773 0.295723542 0.304150016 0.305452472 0.307001263 0.313136087 0.316200690 0.316465400 0.321838597 0.329099143 0.331941690 0.349559814 0.351581488 0.354393280 0.355230820 0.359783851 0.362253868 0.362737962 0.383183271 0.385487680 0.391247809 0.410159463 0.425049447 0.429512791 0.452663860 0.468256398 0.473379900 0.475837448 0.482312219 0.486724742 0.489848827 0.508389053 0.514069970 0.534708988 0.565854535 0.572499946 0.591339914 0.593156487 0.606129549 0.607317402 0.643582293 0.645863539 0.647838037 0.674084777 0.677080923 0.684532768 0.691320086 0.692592404 0.699114449 0.703952497 0.716780355 0.741081287 0.751141458 0.758130738 0.764895717 0.772197332 0.778624284 0.810375118 0.812403331 0.815140759 0.821517779 0.821549909 0.827186658 0.831132953 0.835249504 0.836323171 0.845046822 0.845631012 0.848028970 0.857812712 0.864425118 0.864788803 0.873032890 0.880790329 0.884146744 0.889153665 0.891757899 0.900410604 0.903447364 0.920290461 0.923149903 0.932536510 0.934675410 0.964469397 0.975594822 0.985561715 1.000829208 1.016794561 1.026560186 1.041037114 1.049312266 1.057054727 1.067651364 1.086150424 1.088377906 1.103235540 1.105985989 1.112141361 1.119321061 1.123329911 1.135147324 1.142189828 1.170914734 1.173783061 1.180725407 1.185823689 1.188490548 1.194343715 1.223496531 1.226348786 1.273626725 1.300009570 1.318719702 1.327642479 1.332134753 1.333464150 1.335469715 1.339894483 1.342464940 1.344841620 1.358336269 1.375232036 1.382755825 1.383752561 1.408557802 1.419456849 1.433043348 1.551331199 1.661493255 1.774456051</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">152</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34682509" y3="0.01017762" z3="-0.18466617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39414168" y3="0.14887097" z3="0.41688273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64839913" y3="0.4189903" z3="-0.33701732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71139982" y3="1.20736112" z3="-2.24048211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38682958" y3="0.38950404" z3="-1.17087563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70532386" y3="0.81474117" z3="-3.6326884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60421056" y3="1.71900281" z3="-3.09752786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33233675" y3="2.56161867" z3="-4.546407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52927185" y3="1.21718336" z3="-4.33283841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.44762207" y3="2.89684606" z3="-5.09640143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91708225" y3="-0.51620714" z3="-3.43244503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10233851" y3="-0.0164437" z3="-0.9877127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41263199" y3="-1.1556404" z3="-1.99665237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94084022" y3="-1.04427044" z3="-1.80980783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12966702" y3="-2.47407324" z3="-1.86360038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12523879" y3="-3.57968131" z3="0.63700144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00319093" y3="-5.31756366" z3="-4.74737086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23226106" y3="-5.037795" z3="-3.71560695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82973116" y3="-4.29125939" z3="-1.11117614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79722451" y3="-4.64788969" z3="-2.86055435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55380322" y3="-5.08132817" z3="-3.26746859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85342102" y3="-4.70153919" z3="-1.96160571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51014986" y3="-4.29053362" z3="-1.54174253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83473288" y3="-4.6042113" z3="-3.19916707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35697802" y3="-5.38197737" z3="-3.9441821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89449712" y3="-4.69970603" z3="-1.62790387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01619729" y3="-3.82189418" z3="0.2028497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15382509" y3="-3.61223118" z3="0.85273378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04178046" y3="-4.07773034" z3="0.4223798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14520023" y3="-3.47488275" z3="2.31933605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19743334" y3="-3.29481724" z3="5.1175545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33976584" y3="-3.68121942" z3="3.02513066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97659178" y3="-3.18314571" z3="3.03869731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99996444" y3="-3.09463021" z3="4.42765781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36530769" y3="-3.59292931" z3="4.41403886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25482962" y3="-3.92262101" z3="2.47869261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0182644" y3="-3.04715886" z3="2.53152759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0693107" y3="-2.89098034" z3="4.96637861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30202959" y3="-3.76568831" z3="4.95082443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21435576" y3="-3.23416286" z3="6.2093393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43575142" y3="-3.94362202" z3="-0.63564906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.199147" y3="-3.4500671" z3="-1.08836492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49746289" y3="0.20968552" z3="-4.68806725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07688263" y3="-1.68608466" z3="0.00019263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87414579" y3="-0.93278185" z3="1.1550877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.79951261" y3="-0.29252456" z3="1.46424176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33598224" y3="0.59919614" z3="1.17098155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.38707733" y3="1.4457634" z3="-0.48429497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.02177437" y3="-0.6387997" z3="1.42116229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37098357" y3="1.84294402" z3="2.57232645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.83187197" y3="-0.91174024" z3="2.0712579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.5726769" y3="-0.30096484" z3="3.32510658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16100892" y3="0.72487852" z3="-1.28785631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.40719315" y3="2.21708496" z3="-0.50230155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.35481512" y3="1.94625252" z3="-0.66434517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02172921" y3="-0.98335362" z3="2.46914589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.00009527" y3="-0.17870627" z3="1.20009885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.91794117" y3="-1.49457244" z3="0.73417707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43639022" y3="1.33973488" z3="3.55307081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55446032" y3="2.44782207" z3="2.56567182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22439938" y3="2.53826748" z3="2.47968821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.70767937" y3="-0.76964321" z3="3.82166111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.4793626" y3="-0.46280182" z3="3.92337599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.38904063" y3="0.77982469" z3="3.20259192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85635085" y3="-0.74925851" z3="0.99981419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40795488" y3="-2.06872143" z3="0.85892963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75350349" y3="-2.70847349" z3="1.90397217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5645273" y3="-2.01612697" z3="3.0962615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0694006" y3="-0.73431067" z3="3.29501756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72344838" y3="-0.10798712" z3="2.2387903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49885424" y3="-2.56476291" z3="-0.10847211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34070199" y3="-3.71037557" z3="1.77987208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.7027763" y3="-2.60640998" z3="4.12526251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90542141" y3="-0.22585972" z3="4.24620207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08545972" y3="0.91740516" z3="2.3568111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82789967" y3="0.42909693" z3="-4.28859824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80478529" y3="-0.5368421" z3="-4.48874605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44555014" y3="-1.72729051" z3="-5.10942963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1502824" y3="-1.95766446" z3="-5.56229897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8188828" y3="-0.98780654" z3="-5.34167635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08344178" y3="1.35122685" z3="-3.76101448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83101231" y3="-0.39127967" z3="-4.14881201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45474386" y3="-2.77571786" z3="-5.27051945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08926018" y3="-2.8971146" z3="-6.06093362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84634544" y3="-1.17313875" z3="-5.65906821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38048091" y3="-1.90673269" z3="5.0663371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32131256" y3="-3.74573514" z3="3.9638183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21860776" y3="-3.67351023" z3="-6.05045321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.46730908" y3="-2.69425311" z3="-4.6040179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05928462" y3="1.15593561" z3="-1.48168688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08938897" y3="1.5443128" z3="-2.45132137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42326746" y3="1.50243709" z3="-1.6832095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81960696" y3="2.18420053" z3="-2.80712388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15688817" y3="1.20353395" z3="-0.92817117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87261091" y3="2.43940461" z3="-2.95424378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53545325" y3="2.2334889" z3="-3.61318194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86268263" y3="2.54362752" z3="-3.78633642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80672451" y3="2.50649916" z3="-4.37999716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18339111" y3="3.06647097" z3="-4.69151283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35517003" y3="3.12303565" z3="-3.26690742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.22866818" y3="3.53652373" z3="-4.03734724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.15416187" y3="4.13243065" z3="-2.65893062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88259398" y3="5.46633642" z3="-2.8517806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99144478" y3="3.84205262" z3="-2.02250815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5114568" y3="6.22174184" z3="-2.37035228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.98381089" y3="4.92288809" z3="-4.23337234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.79457171" y3="5.87138999" z3="-3.66069305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.12412599" y3="5.22103477" z3="-4.84130498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.59492457" y3="6.93473247" z3="-3.81465833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48273938" y3="-2.1588217" z3="-0.29028419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4710128" y3="-2.96035389" z3="-1.04840908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99927056" y3="-2.52740633" z3="0.61027091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0992518" y3="-1.34005996" z3="-0.70776758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19161059" y3="-1.40159776" z3="-1.18677047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32751488" y3="-0.3613399" z3="-1.53597245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11233141" y3="-1.5340277" z3="-0.99881273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.451657" y3="-2.05803716" z3="-2.03078566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3468,.0102,-.1847;7.3941,.1489,.4169;6.6484,.419,-.337;4.7114,1.2074,-2.2405;4.3868,.3895,-1.1709;2.7053,.8147,-3.6327;3.6042,1.719,-3.0975;1.3323,2.5616,-4.5464;1.5293,1.2172,-4.3328;.4476,2.8968,-5.0964;2.9171,-.5162,-3.4324;3.1023,-.0164,-.9877;2.4126,-1.1556,-1.9967;.9408,-1.0443,-1.8098;3.1297,-2.4741,-1.8636;-.1252,-3.5797,.637;-.0032,-5.3176,-4.7474;-.2323,-5.0378,-3.7156;-.8297,-4.2913,-1.1112;.7972,-4.6479,-2.8606;-1.5538,-5.0813,-3.2675;-1.8534,-4.7015,-1.9616;.5101,-4.2905,-1.5417;1.8347,-4.6042,-3.1992;-2.357,-5.382,-3.9442;-2.8945,-4.6997,-1.6279;-1.0162,-3.8219,.2028;-2.1538,-3.6122,.8527;-3.0418,-4.0777,.4224;-2.1452,-3.4749,2.3193;-2.1974,-3.2948,5.1176;-3.3398,-3.6812,3.0251;-.9766,-3.1831,3.0387;-1,-3.0946,4.4277;-3.3653,-3.5929,4.414;-4.2548,-3.9226,2.4787;-.0183,-3.0472,2.5315;-.0693,-2.891,4.9664;-4.302,-3.7657,4.9508;-2.2144,-3.2342,6.2093;1.4358,-3.9436,-.6356;2.1991,-3.4501,-1.0884;.4975,.2097,-4.6881;-3.0769,-1.6861,.0002;-2.8741,-.9328,1.1551;-1.7995,-.2925,1.4642;-.336,.5992,1.171;-.3871,1.4458,-.4843;1.0218,-.6388,1.4212;-.371,1.8429,2.5723;-3.8319,-.9117,2.0713;-3.5727,-.301,3.3251;-.161,.7249,-1.2879;.4072,2.2171,-.5023;-1.3548,1.9463,-.6643;1.0217,-.9834,2.4691;2.0001,-.1787,1.2001;.9179,-1.4946,.7342;-.4364,1.3397,3.5531;.5545,2.4478,2.5657;-1.2244,2.5383,2.4797;-2.7077,-.7696,3.8217;-4.4794,-.4628,3.9234;-3.389,.7798,3.2026;4.8564,-.7493,.9998;4.408,-2.0687,.8589;3.7535,-2.7085,1.904;3.5645,-2.0161,3.0963;4.0694,-.7343,3.295;4.7234,-.108,2.2388;4.4989,-2.5648,-.1085;3.3407,-3.7104,1.7799;2.7028,-2.6064,4.1253;3.9054,-.2259,4.2462;5.0855,.9174,2.3568;-.8279,.4291,-4.2886;-1.8048,-.5368,-4.4887;-1.4456,-1.7273,-5.1094;-.1503,-1.9577,-5.5623;.8189,-.9878,-5.3417;-1.0834,1.3512,-3.761;-2.831,-.3913,-4.1488;-2.4547,-2.7757,-5.2705;.0893,-2.8971,-6.0609;1.8463,-1.1731,-5.6591;2.3805,-1.9067,5.0663;2.3213,-3.7457,3.9638;-2.2186,-3.6735,-6.0505;-3.4673,-2.6943,-4.604;7.0593,1.1559,-1.4817;6.0894,1.5443,-2.4513;8.4233,1.5024,-1.6832;8.8196,2.1842,-2.8071;9.1569,1.2035,-.9282;9.8726,2.4394,-2.9542;6.5355,2.2335,-3.6132;7.8627,2.5436,-3.7863;5.8067,2.5065,-4.38;8.1834,3.0665,-4.6915;3.3552,3.123,-3.2669;2.2287,3.5365,-4.0373;4.1542,4.1324,-2.6589;3.8826,5.4663,-2.8518;4.9914,3.8421,-2.0225;4.5115,6.2217,-2.3704;1.9838,4.9229,-4.2334;2.7946,5.8714,-3.6607;1.1241,5.221,-4.8413;2.5949,6.9347,-3.8147;-4.4827,-2.1588,-.2903;-4.471,-2.9604,-1.0484;-4.9993,-2.5274,.6103;-5.0993,-1.3401,-.7078;-2.1916,-1.4016,-1.1868;-2.3275,-.3613,-1.536;-1.1123,-1.534,-.9988;-2.4517,-2.058,-2.0308;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650349025078</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003171338334 0.000393271169 0.020144888820 0.005517540137</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030501359 -0.000775504 -0.000066169 0.000251802 0.000280305 0.000357251 0.000394567 0.000467681 0.000599912 0.000773333 0.000906592 0.001102970 0.001231495 0.001259058 0.001352754 0.001382301 0.001638487 0.001707370 0.001776876 0.001919551 0.002101783 0.002435629 0.002571538 0.002635212 0.002808800 0.003089367 0.003226597 0.003407249 0.003799328 0.003922163 0.004310655 0.004685664 0.004788271 0.004965123 0.005803693 0.005940569 0.006148250 0.006466506 0.006768826 0.007484774 0.007866653 0.008087833 0.009054330 0.009359962 0.009808277 0.010636547 0.010863366 0.011402199 0.011673384 0.011917052 0.012691434 0.013035852 0.013832933 0.014228951 0.014868204 0.015257168 0.015479119 0.015585397 0.015884948 0.016605716 0.017245571 0.017373166 0.018710251 0.018969354 0.019553271 0.020364853 0.021134795 0.021248491 0.022293494 0.023068672 0.024794955 0.025849379 0.026458199 0.026687990 0.027119005 0.028806680 0.029286652 0.031091667 0.032206597 0.033191148 0.033548447 0.034966354 0.035525538 0.036146321 0.038450705 0.038945872 0.040311442 0.040810133 0.041379648 0.044307180 0.045121422 0.046188795 0.046909425 0.049101707 0.050199379 0.050666722 0.050897257 0.051168246 0.052438767 0.052482964 0.052809742 0.052878178 0.054224521 0.054631843 0.055276020 0.055962559 0.056405238 0.056484693 0.056913375 0.058206435 0.059922805 0.060504175 0.061339370 0.061778363 0.062809107 0.063625204 0.064907813 0.065476372 0.066254752 0.067503636 0.068576581 0.069956194 0.072499042 0.074105575 0.074275381 0.076008767 0.077392651 0.083253779 0.084657792 0.086555410 0.086878545 0.087505701 0.090241430 0.090661621 0.092893088 0.094551847 0.095130789 0.096272750 0.096922552 0.097672972 0.098678145 0.099444956 0.100117280 0.102243038 0.102554095 0.102913779 0.103280188 0.103892197 0.104312234 0.106637231 0.107217905 0.107508733 0.108964607 0.110125176 0.111683573 0.112153211 0.113066276 0.114711587 0.116063040 0.118791872 0.120456708 0.121219734 0.122101447 0.123697286 0.125143023 0.126187649 0.126794573 0.131449535 0.134688623 0.135428133 0.142298540 0.143390748 0.146780549 0.147093074 0.149561997 0.151773537 0.154384919 0.155552030 0.156521185 0.160788857 0.161638060 0.173150580 0.173700624 0.178573690 0.183870346 0.184827965 0.188866858 0.189900542 0.193691788 0.193812950 0.198008061 0.199650982 0.204861648 0.206740467 0.206914348 0.209664652 0.211037599 0.215038739 0.216588670 0.217519301 0.220305971 0.224737513 0.226137891 0.231697919 0.234654707 0.235317931 0.235566541 0.244418090 0.255597493 0.256882478 0.262618300 0.269473813 0.279207843 0.282806026 0.286129027 0.291201261 0.295726737 0.304151924 0.305455290 0.307013192 0.313151708 0.316203678 0.316465390 0.321844157 0.329099276 0.331956355 0.349605455 0.351581603 0.354428212 0.355269568 0.359791070 0.362254652 0.362755449 0.383183140 0.385488632 0.391348628 0.410159410 0.425104931 0.429519281 0.452827992 0.468277235 0.473433902 0.475958388 0.482330401 0.486734239 0.489881620 0.508389050 0.514070391 0.534713111 0.565870690 0.572502911 0.591380972 0.593158871 0.606151348 0.607331254 0.643596173 0.645889035 0.647874716 0.674106358 0.677080911 0.684542388 0.691322356 0.692597820 0.699142025 0.703954701 0.716781578 0.741111165 0.751143411 0.758145852 0.764909132 0.772201700 0.778625440 0.810378795 0.812436770 0.815183201 0.821523027 0.821601696 0.827331551 0.831170277 0.835266612 0.836351087 0.845048773 0.845631232 0.848029180 0.857813311 0.864431612 0.864809220 0.873034966 0.880814480 0.884147835 0.889175669 0.891760907 0.900418609 0.903475993 0.920290314 0.923186177 0.932542627 0.934692736 0.964475279 0.975596002 0.985578115 1.000856862 1.016904230 1.026572277 1.041082972 1.049340088 1.057056616 1.067652010 1.086183547 1.088379738 1.103245023 1.105987715 1.112143189 1.119354431 1.123359606 1.135157177 1.142220063 1.170962018 1.173802177 1.180736729 1.185917646 1.188501223 1.194380235 1.223496547 1.226397979 1.273731992 1.300098980 1.318753547 1.327658483 1.332138540 1.333573446 1.335494217 1.339895362 1.342518260 1.344841736 1.358351788 1.375376601 1.382763752 1.383790365 1.408559410 1.419457132 1.433046351 1.551333363 1.662128155 1.774472903</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">153</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34624268" y3="0.01004406" z3="-0.18183953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39355113" y3="0.14607386" z3="0.41825532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64772025" y3="0.41540085" z3="-0.33594333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71088911" y3="1.20398371" z3="-2.23902958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38613852" y3="0.38838505" z3="-1.16828076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70319774" y3="0.81283914" z3="-3.62929973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60346107" y3="1.71637273" z3="-3.09524775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33189507" y3="2.5595222" z3="-4.54319748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52634753" y3="1.21679511" z3="-4.32736387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.44638637" y3="2.89595505" z3="-5.0914516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91537508" y3="-0.51878736" z3="-3.43064216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10134723" y3="-0.01848102" z3="-0.98533986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41423849" y3="-1.15980031" z3="-1.99412522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94215941" y3="-1.05330975" z3="-1.80543765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13565273" y3="-2.47599753" z3="-1.86220193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12242546" y3="-3.57795474" z3="0.63129407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00434444" y3="-5.31475096" z3="-4.75271828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22633646" y3="-5.03408462" z3="-3.72144722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82718916" y3="-4.28691653" z3="-1.11779742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80194222" y3="-4.64633311" z3="-2.86451145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54870653" y3="-5.07483111" z3="-3.2755394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84985124" y3="-4.69498204" z3="-1.97006049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51311237" y3="-4.28868106" z3="-1.54615618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84089482" y3="-4.60678655" z3="-3.20116682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35054647" y3="-5.37496193" z3="-3.95337521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88974879" y3="-4.69474717" z3="-1.63799586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0134782" y3="-3.81973166" z3="0.19677266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15104602" y3="-3.61319769" z3="0.84766166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0381071" y3="-4.07999844" z3="0.41702365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14137918" y3="-3.4784266" z3="2.31455836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19329987" y3="-3.30329379" z3="5.11305521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33505584" y3="-3.68967677" z3="3.02040003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97320008" y3="-3.18411522" z3="3.03396613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99707122" y3="-3.09726243" z3="4.42302619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36026772" y3="-3.60419538" z3="4.40953836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25144542" y3="-3.93042702" z3="2.47345956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01629831" y3="-3.04207002" z3="2.52676996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06930325" y3="-2.88803301" z3="4.96168158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29657889" y3="-3.78059682" z3="4.94630173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21082534" y3="-3.24345608" z3="6.20475942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43836858" y3="-3.94552203" z3="-0.63789658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20475933" y3="-3.4536321" z3="-1.08895194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49323461" y3="0.21059805" z3="-4.68195391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07870708" y3="-1.68749367" z3="-0.00088592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87265125" y3="-0.93468087" z3="1.15374095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.79644497" y3="-0.29439423" z3="1.45868534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33688643" y3="0.60345551" z3="1.16533119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.38683184" y3="1.44354921" z3="-0.49344058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.02405835" y3="-0.62960086" z3="1.42483458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38146161" y3="1.85507619" z3="2.55915478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.82691469" y3="-0.91443231" z3="2.0739723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.56291294" y3="-0.30453881" z3="3.32757933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16070064" y3="0.71994948" z3="-1.29540108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.40255957" y3="2.21688485" z3="-0.51204128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.35565463" y3="1.9424824" z3="-0.67562706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02186155" y3="-0.97125557" z3="2.4735713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="2.0008699" y3="-0.167094" z3="1.20559483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.92345815" y3="-1.48725232" z3="0.73914846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44641507" y3="1.35804904" z3="3.54348454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.53980014" y3="2.46558409" z3="2.55036528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23867409" y3="2.54499954" z3="2.45954332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.69329833" y3="-0.76839235" z3="3.81912667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.46483989" y3="-0.47126859" z3="3.93172527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.38641394" y3="0.77574302" z3="3.20408442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85614663" y3="-0.74749405" z3="1.00423664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40643278" y3="-2.0667599" z3="0.86601964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75352327" y3="-2.70428485" z3="1.91368593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56716884" y3="-2.00987813" z3="3.10581454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.07098486" y3="-0.72786097" z3="3.30022177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72438182" y3="-0.10403188" z3="2.24202778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49232904" y3="-2.56349484" z3="-0.10318191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33855123" y3="-3.70584709" z3="1.79100364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70315269" y3="-2.59720675" z3="4.13449219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90489281" y3="-0.21681627" z3="4.24836385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08517768" y3="0.92145384" z3="2.35627627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83174335" y3="0.43234332" z3="-4.28266579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.81001545" y3="-0.53258079" z3="-4.4839692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45193454" y3="-1.72366767" z3="-5.10422979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15684112" y3="-1.95606382" z3="-5.5568648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.81349277" y3="-0.9875204" z3="-5.33622067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08666468" y3="1.35513725" z3="-3.75486309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83525972" y3="-0.38421029" z3="-4.144849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46212779" y3="-2.77096258" z3="-5.26485381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0811337" y3="-2.89594147" z3="-6.05473094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84024028" y3="-1.17492351" z3="-5.65315888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37849223" y3="-1.89404" z3="5.0708569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31825131" y3="-3.73746004" z3="3.97357891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22771897" y3="-3.66828788" z3="-6.04528316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.47376963" y3="-2.68908769" z3="-4.59666916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0584668" y3="1.14842752" z3="-1.48223968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08835922" y3="1.5368035" z3="-2.4516718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42266128" y3="1.49428969" z3="-1.68481869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.81901205" y3="2.17598969" z3="-2.80962714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15678219" y3="1.19756016" z3="-0.92928159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87230565" y3="2.43162132" z3="-2.95740663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53402397" y3="2.22416646" z3="-3.61475976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8618021" y3="2.53453123" z3="-3.7889052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80498189" y3="2.49775115" z3="-4.38105521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18251767" y3="3.05679515" z3="-4.69489371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.35534548" y3="3.12089054" z3="-3.26351584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.22894014" y3="3.5347234" z3="-4.03355422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.15610659" y3="4.12946546" z3="-2.65627969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88658658" y3="5.46297581" z3="-2.84982471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99473644" y3="3.83732241" z3="-2.02218172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.51904805" y3="6.21570652" z3="-2.37235963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.98341781" y3="4.92300319" z3="-4.22642133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.79671921" y3="5.87008766" z3="-3.65566327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.12265625" y3="5.22276108" z3="-4.83230654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.59612444" y3="6.93500638" z3="-3.80726485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48436124" y3="-2.16185456" z3="-0.28769488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47376624" y3="-2.96428658" z3="-1.04504859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99817159" y3="-2.53022158" z3="0.61467673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10262067" y3="-1.34422819" z3="-0.7045753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19646394" y3="-1.40130488" z3="-1.18924997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33384595" y3="-0.36039707" z3="-1.53705388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11739033" y3="-1.53274638" z3="-1.0028409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45848574" y3="-2.05698483" z3="-2.03335842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3462,.01,-.1818;7.3936,.1461,.4183;6.6477,.4154,-.3359;4.7109,1.204,-2.239;4.3861,.3884,-1.1683;2.7032,.8128,-3.6293;3.6035,1.7164,-3.0952;1.3319,2.5595,-4.5432;1.5263,1.2168,-4.3274;.4464,2.896,-5.0915;2.9154,-.5188,-3.4306;3.1013,-.0185,-.9853;2.4142,-1.1598,-1.9941;.9422,-1.0533,-1.8054;3.1357,-2.476,-1.8622;-.1224,-3.578,.6313;.0043,-5.3148,-4.7527;-.2263,-5.0341,-3.7214;-.8272,-4.2869,-1.1178;.8019,-4.6463,-2.8645;-1.5487,-5.0748,-3.2755;-1.8499,-4.695,-1.9701;.5131,-4.2887,-1.5462;1.8409,-4.6068,-3.2012;-2.3505,-5.375,-3.9534;-2.8897,-4.6947,-1.638;-1.0135,-3.8197,.1968;-2.151,-3.6132,.8477;-3.0381,-4.08,.417;-2.1414,-3.4784,2.3146;-2.1933,-3.3033,5.1131;-3.3351,-3.6897,3.0204;-.9732,-3.1841,3.034;-.9971,-3.0973,4.423;-3.3603,-3.6042,4.4095;-4.2514,-3.9304,2.4735;-.0163,-3.0421,2.5268;-.0693,-2.888,4.9617;-4.2966,-3.7806,4.9463;-2.2108,-3.2435,6.2048;1.4384,-3.9455,-.6379;2.2048,-3.4536,-1.089;.4932,.2106,-4.682;-3.0787,-1.6875,-.0009;-2.8727,-.9347,1.1537;-1.7964,-.2944,1.4587;-.3369,.6035,1.1653;-.3868,1.4435,-.4934;1.0241,-.6296,1.4248;-.3815,1.8551,2.5592;-3.8269,-.9144,2.074;-3.5629,-.3045,3.3276;-.1607,.7199,-1.2954;.4026,2.2169,-.512;-1.3557,1.9425,-.6756;1.0219,-.9713,2.4736;2.0009,-.1671,1.2056;.9235,-1.4873,.7391;-.4464,1.358,3.5435;.5398,2.4656,2.5504;-1.2387,2.545,2.4595;-2.6933,-.7684,3.8191;-4.4648,-.4713,3.9317;-3.3864,.7757,3.2041;4.8561,-.7475,1.0042;4.4064,-2.0668,.866;3.7535,-2.7043,1.9137;3.5672,-2.0099,3.1058;4.071,-.7279,3.3002;4.7244,-.104,2.242;4.4923,-2.5635,-.1032;3.3386,-3.7058,1.791;2.7032,-2.5972,4.1345;3.9049,-.2168,4.2484;5.0852,.9215,2.3563;-.8317,.4323,-4.2827;-1.81,-.5326,-4.484;-1.4519,-1.7237,-5.1042;-.1568,-1.9561,-5.5569;.8135,-.9875,-5.3362;-1.0867,1.3551,-3.7549;-2.8353,-.3842,-4.1448;-2.4621,-2.771,-5.2649;.0811,-2.8959,-6.0547;1.8402,-1.1749,-5.6532;2.3785,-1.894,5.0709;2.3183,-3.7375,3.9736;-2.2277,-3.6683,-6.0453;-3.4738,-2.6891,-4.5967;7.0585,1.1484,-1.4822;6.0884,1.5368,-2.4517;8.4227,1.4943,-1.6848;8.819,2.176,-2.8096;9.1568,1.1976,-.9293;9.8723,2.4316,-2.9574;6.534,2.2242,-3.6148;7.8618,2.5345,-3.7889;5.805,2.4978,-4.3811;8.1825,3.0568,-4.6949;3.3553,3.1209,-3.2635;2.2289,3.5347,-4.0336;4.1561,4.1295,-2.6563;3.8866,5.463,-2.8498;4.9947,3.8373,-2.0222;4.519,6.2157,-2.3724;1.9834,4.923,-4.2264;2.7967,5.8701,-3.6557;1.1227,5.2228,-4.8323;2.5961,6.935,-3.8073;-4.4844,-2.1619,-.2877;-4.4738,-2.9643,-1.045;-4.9982,-2.5302,.6147;-5.1026,-1.3442,-.7046;-2.1965,-1.4013,-1.1892;-2.3338,-.3604,-1.5371;-1.1174,-1.5327,-1.0028;-2.4585,-2.057,-2.0334;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650330842800</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003343982214 0.000412254114 0.017760903258 0.005330287239</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030502130 -0.000882636 -0.000039288 0.000251832 0.000277264 0.000356420 0.000395372 0.000467710 0.000600746 0.000771027 0.000910503 0.001103221 0.001231660 0.001258534 0.001354461 0.001383994 0.001646415 0.001711403 0.001775385 0.001921099 0.002114734 0.002435694 0.002571699 0.002644161 0.002809048 0.003090565 0.003237210 0.003408669 0.003801316 0.003923274 0.004314285 0.004690260 0.004798213 0.004965278 0.005813297 0.005942018 0.006157240 0.006494076 0.006771271 0.007485494 0.007866763 0.008087877 0.009055753 0.009363242 0.009807737 0.010645211 0.010873530 0.011412311 0.011673434 0.011931220 0.012718020 0.013036141 0.013835576 0.014231391 0.014876562 0.015259399 0.015504169 0.015586828 0.015884580 0.016626022 0.017251596 0.017385031 0.018720858 0.019056938 0.019557220 0.020370697 0.021135159 0.021258143 0.022301172 0.023068457 0.024801085 0.025851131 0.026464821 0.026724833 0.027119460 0.028811060 0.029291605 0.031188885 0.032299508 0.033191044 0.033565457 0.034995488 0.035524844 0.036166671 0.038474568 0.038963687 0.040311724 0.040839643 0.041432717 0.044310280 0.045121608 0.046187651 0.046929610 0.049101808 0.050202671 0.050668258 0.050898274 0.051168937 0.052440973 0.052484621 0.052818020 0.052879975 0.054229068 0.054631957 0.055276111 0.055963251 0.056407786 0.056488805 0.056916286 0.058213760 0.059939161 0.060505586 0.061339516 0.061778281 0.062833001 0.063625586 0.064911100 0.065476366 0.066254572 0.067503876 0.068578208 0.069982364 0.072502423 0.074125182 0.074275738 0.076020667 0.077395453 0.083253728 0.084658441 0.086590058 0.086883957 0.087520812 0.090242823 0.090667427 0.092905682 0.094558499 0.095139495 0.096283744 0.096922986 0.097673381 0.098686381 0.099450299 0.100117551 0.102245393 0.102560158 0.102922817 0.103310502 0.103892012 0.104315261 0.106650970 0.107240030 0.107560855 0.108964674 0.110126474 0.111683705 0.112165423 0.113075236 0.114713042 0.116064417 0.118792009 0.120474294 0.121220002 0.122101479 0.123746393 0.125146863 0.126187805 0.126797186 0.131470749 0.134704772 0.135443861 0.142299900 0.143390508 0.146780588 0.147103048 0.149562509 0.151774521 0.154389068 0.155552120 0.156525932 0.160815147 0.161638102 0.173161741 0.173702718 0.178606946 0.183881828 0.184856630 0.188870848 0.189906115 0.193714309 0.193822782 0.198065525 0.199652392 0.204861355 0.206740806 0.206919153 0.209667866 0.211044505 0.215084706 0.216647704 0.217519548 0.220307094 0.224741938 0.226146898 0.231707180 0.234661306 0.235317969 0.235566708 0.244429603 0.255598082 0.256883000 0.262633490 0.269474195 0.279302970 0.282807329 0.286129211 0.291215255 0.295730755 0.304151911 0.305459128 0.307021225 0.313152926 0.316204673 0.316467731 0.321846670 0.329100260 0.331974347 0.349667307 0.351581922 0.354450273 0.355290471 0.359791134 0.362254895 0.362762320 0.383194765 0.385488740 0.391429319 0.410168198 0.425162995 0.429532287 0.452949476 0.468317538 0.473522287 0.476217931 0.482350266 0.486740627 0.489897401 0.508389250 0.514076391 0.534730126 0.565874247 0.572513308 0.591436945 0.593160202 0.606167899 0.607331005 0.643613025 0.645906435 0.647879331 0.674118928 0.677085369 0.684559436 0.691324205 0.692602168 0.699164980 0.703958200 0.716783735 0.741133898 0.751144090 0.758146375 0.764909078 0.772208878 0.778628377 0.810382504 0.812476656 0.815227676 0.821523684 0.821656011 0.827486224 0.831193916 0.835274300 0.836364825 0.845049915 0.845631660 0.848034494 0.857813464 0.864441997 0.864851646 0.873035117 0.880825732 0.884149707 0.889183613 0.891762486 0.900421165 0.903514856 0.920299102 0.923228040 0.932588813 0.934741107 0.964491746 0.975596133 0.985583351 1.000874780 1.016987494 1.026594458 1.041130246 1.049395558 1.057059552 1.067652463 1.086224546 1.088382855 1.103255834 1.105988949 1.112143211 1.119362455 1.123371224 1.135168161 1.142252672 1.170994238 1.173822062 1.180746376 1.185960126 1.188520579 1.194449387 1.223501298 1.226443537 1.273739317 1.300206551 1.318781841 1.327658842 1.332138969 1.333677887 1.335497912 1.339895452 1.342542407 1.344846077 1.358355510 1.375563939 1.382764519 1.383821080 1.408559340 1.419457486 1.433049970 1.551341795 1.662783966 1.774504852</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">154</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34623766" y3="0.01018374" z3="-0.18167384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39424955" y3="0.14598617" z3="0.41872027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64879868" y3="0.41507465" z3="-0.33591869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71271206" y3="1.20269278" z3="-2.2405052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38678139" y3="0.38825189" z3="-1.16880084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70272087" y3="0.81548674" z3="-3.62766716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60588083" y3="1.71708076" z3="-3.09614208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3311779" y3="2.56598601" z3="-4.53682975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52527489" y3="1.2212978" z3="-4.32323138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4456666" y3="2.90334577" z3="-5.08434594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91277993" y3="-0.5162393" z3="-3.42921627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10164514" y3="-0.01538509" z3="-0.98486872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41343006" y3="-1.15695226" z3="-1.99212911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.94162257" y3="-1.05071691" z3="-1.80204194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13549469" y3="-2.47286729" z3="-1.86078329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.11908173" y3="-3.57585367" z3="0.62871766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01072066" y3="-5.31283659" z3="-4.75537614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.21990591" y3="-5.03389053" z3="-3.72360412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82191837" y3="-4.28804015" z3="-1.1195845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80824941" y3="-4.64672545" z3="-2.866108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54240764" y3="-5.07544231" z3="-3.27793848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84455765" y3="-4.69530125" z3="-1.97253332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51913133" y3="-4.29075594" z3="-1.54726807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84604062" y3="-4.6036814" z3="-3.20265053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34478873" y3="-5.37381579" z3="-3.95655214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88714566" y3="-4.68983399" z3="-1.64156928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.00962163" y3="-3.81956397" z3="0.19456055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14750733" y3="-3.61679388" z3="0.84570411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03339929" y3="-4.08534873" z3="0.41466091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13896016" y3="-3.48246338" z3="2.31249591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19188437" y3="-3.31064301" z3="5.11117857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33212468" y3="-3.69840669" z3="3.01784342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97212807" y3="-3.1843666" z3="3.03236887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.9960037" y3="-3.09989345" z3="4.42165709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.35809165" y3="-3.61416602" z3="4.40700143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.24591529" y3="-3.94401485" z3="2.47074098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01526205" y3="-3.03866463" z3="2.52538099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.06697193" y3="-2.89115615" z3="4.96121693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29372719" y3="-3.79473652" z3="4.94339565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.20896538" y3="-3.25328222" z3="6.20315652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44385279" y3="-3.94804265" z3="-0.63859168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20725822" y3="-3.45277332" z3="-1.0888156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49076788" y3="0.21532715" z3="-4.67745965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08054026" y3="-1.69208427" z3="-0.00078703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87495667" y3="-0.94014117" z3="1.15435413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.80008386" y3="-0.29824644" z3="1.45919573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34528832" y3="0.60641887" z3="1.16487027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39724552" y3="1.44290895" z3="-0.49561718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0201958" y3="-0.62096052" z3="1.42670143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3958221" y3="1.86011747" z3="2.55672175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.82833612" y3="-0.92296144" z3="2.07510868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.56511745" y3="-0.31401008" z3="3.32880372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16617631" y3="0.71843078" z3="-1.29490247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39264187" y3="2.21870618" z3="-0.51605068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36747446" y3="1.93745269" z3="-0.68025614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01765339" y3="-0.96207676" z3="2.47575956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.99656899" y3="-0.15618559" z3="1.20824433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.92334516" y3="-1.4796554" z3="0.7421714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.45854728" y3="1.36385182" z3="3.54101417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.52322886" y3="2.47465723" z3="2.54773297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.25639557" y3="2.54556153" z3="2.45610728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.69491319" y3="-0.77907656" z3="3.81927871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.46691697" y3="-0.48235602" z3="3.93177065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.38822965" y3="0.7676197" z3="3.2073838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85418319" y3="-0.74389679" z3="1.00541587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40267841" y3="-2.06273343" z3="0.86894054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.74810147" y3="-2.6980518" z3="1.91660489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.561521" y3="-2.0016717" z3="3.10675252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06947407" y3="-0.72025071" z3="3.30137912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72388499" y3="-0.09849686" z3="2.2425805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49307858" y3="-2.56194269" z3="-0.09637708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33425017" y3="-3.69982174" z3="1.79662775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70067217" y3="-2.587719" z3="4.13888346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90847978" y3="-0.20886309" z3="4.25202697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08896282" y3="0.92643562" z3="2.35757906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83392504" y3="0.43850141" z3="-4.27777822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8133604" y3="-0.52509302" z3="-4.47769245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45741791" y3="-1.71682031" z3="-5.09793496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.16285487" y3="-1.95072709" z3="-5.55118763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.80890971" y3="-0.98325584" z3="-5.33103327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08689579" y3="1.36164342" z3="-3.74991656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83874558" y3="-0.37617528" z3="-4.13752619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46914633" y3="-2.76310285" z3="-5.25887802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07380898" y3="-2.89108323" z3="-6.04936109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83547414" y3="-1.17153909" z3="-5.64878237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38065106" y3="-1.88440375" z3="5.078606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31767397" y3="-3.72763644" z3="3.98115085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23758738" y3="-3.65972305" z3="-6.04154686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4789747" y3="-2.6812215" z3="-4.58804588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0609621" y3="1.14600297" z3="-1.48370646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09143704" y3="1.53435155" z3="-2.45367498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42569096" y3="1.48666048" z3="-1.68811356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82308054" y3="2.16354567" z3="-2.81490134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15897633" y3="1.18768982" z3="-0.9328737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87663289" y3="2.41386042" z3="-2.9643409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53830569" y3="2.21806412" z3="-3.61844545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86647953" y3="2.52324466" z3="-3.79426711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80933252" y3="2.4906205" z3="-4.38524274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18801662" y3="3.04201005" z3="-4.70170051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36095751" y3="3.1214337" z3="-3.26633247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23265544" y3="3.53785649" z3="-4.03276112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1659291" y3="4.12865606" z3="-2.66307448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89809696" y3="5.46327989" z3="-2.85676598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00468382" y3="3.83619904" z3="-2.02949786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53186748" y3="6.21688084" z3="-2.3794817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99142472" y3="4.92486782" z3="-4.22939792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.80790106" y3="5.87123968" z3="-3.66150463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.12968635" y3="5.22580963" z3="-4.83335963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.61100319" y3="6.93528874" z3="-3.81587537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48594192" y3="-2.16927101" z3="-0.28587399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47512491" y3="-2.97237677" z3="-1.04280997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99822013" y3="-2.53768453" z3="0.6174771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10601428" y3="-1.35291292" z3="-0.70262193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.20005204" y3="-1.40350858" z3="-1.19024637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34017283" y3="-0.36313626" z3="-1.53714004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11991672" y3="-1.53346407" z3="-1.00554222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.46162589" y3="-2.05892314" z3="-2.03465009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3462,.0102,-.1817;7.3942,.146,.4187;6.6488,.4151,-.3359;4.7127,1.2027,-2.2405;4.3868,.3883,-1.1688;2.7027,.8155,-3.6277;3.6059,1.7171,-3.0961;1.3312,2.566,-4.5368;1.5253,1.2213,-4.3232;.4457,2.9033,-5.0843;2.9128,-.5162,-3.4292;3.1016,-.0154,-.9849;2.4134,-1.157,-1.9921;.9416,-1.0507,-1.802;3.1355,-2.4729,-1.8608;-.1191,-3.5759,.6287;.0107,-5.3128,-4.7554;-.2199,-5.0339,-3.7236;-.8219,-4.288,-1.1196;.8082,-4.6467,-2.8661;-1.5424,-5.0754,-3.2779;-1.8446,-4.6953,-1.9725;.5191,-4.2908,-1.5473;1.846,-4.6037,-3.2027;-2.3448,-5.3738,-3.9566;-2.8871,-4.6898,-1.6416;-1.0096,-3.8196,.1946;-2.1475,-3.6168,.8457;-3.0334,-4.0853,.4147;-2.139,-3.4825,2.3125;-2.1919,-3.3106,5.1112;-3.3321,-3.6984,3.0178;-.9721,-3.1844,3.0324;-.996,-3.0999,4.4217;-3.3581,-3.6142,4.407;-4.2459,-3.944,2.4707;-.0153,-3.0387,2.5254;-.067,-2.8912,4.9612;-4.2937,-3.7947,4.9434;-2.209,-3.2533,6.2032;1.4439,-3.948,-.6386;2.2073,-3.4528,-1.0888;.4908,.2153,-4.6775;-3.0805,-1.6921,-.0008;-2.875,-.9401,1.1544;-1.8001,-.2982,1.4592;-.3453,.6064,1.1649;-.3972,1.4429,-.4956;1.0202,-.621,1.4267;-.3958,1.8601,2.5567;-3.8283,-.923,2.0751;-3.5651,-.314,3.3288;-.1662,.7184,-1.2949;.3926,2.2187,-.5161;-1.3675,1.9375,-.6803;1.0177,-.9621,2.4758;1.9966,-.1562,1.2082;.9233,-1.4797,.7422;-.4585,1.3639,3.541;.5232,2.4747,2.5477;-1.2564,2.5456,2.4561;-2.6949,-.7791,3.8193;-4.4669,-.4824,3.9318;-3.3882,.7676,3.2074;4.8542,-.7439,1.0054;4.4027,-2.0627,.8689;3.7481,-2.6981,1.9166;3.5615,-2.0017,3.1068;4.0695,-.7203,3.3014;4.7239,-.0985,2.2426;4.4931,-2.5619,-.0964;3.3343,-3.6998,1.7966;2.7007,-2.5877,4.1389;3.9085,-.2089,4.252;5.089,.9264,2.3576;-.8339,.4385,-4.2778;-1.8134,-.5251,-4.4777;-1.4574,-1.7168,-5.0979;-.1629,-1.9507,-5.5512;.8089,-.9833,-5.331;-1.0869,1.3616,-3.7499;-2.8387,-.3762,-4.1375;-2.4691,-2.7631,-5.2589;.0738,-2.8911,-6.0494;1.8355,-1.1715,-5.6488;2.3807,-1.8844,5.0786;2.3177,-3.7276,3.9812;-2.2376,-3.6597,-6.0415;-3.479,-2.6812,-4.588;7.061,1.146,-1.4837;6.0914,1.5344,-2.4537;8.4257,1.4867,-1.6881;8.8231,2.1635,-2.8149;9.159,1.1877,-.9329;9.8766,2.4139,-2.9643;6.5383,2.2181,-3.6184;7.8665,2.5232,-3.7943;5.8093,2.4906,-4.3852;8.188,3.042,-4.7017;3.361,3.1214,-3.2663;2.2327,3.5379,-4.0328;4.1659,4.1287,-2.6631;3.8981,5.4633,-2.8568;5.0047,3.8362,-2.0295;4.5319,6.2169,-2.3795;1.9914,4.9249,-4.2294;2.8079,5.8712,-3.6615;1.1297,5.2258,-4.8334;2.611,6.9353,-3.8159;-4.4859,-2.1693,-.2859;-4.4751,-2.9724,-1.0428;-4.9982,-2.5377,.6175;-5.106,-1.3529,-.7026;-2.2001,-1.4035,-1.1902;-2.3402,-.3631,-1.5371;-1.1199,-1.5335,-1.0055;-2.4616,-2.0589,-2.0347;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650324462007</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003133895616 0.000399449053 0.019074413340 0.005340315426</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030502602 -0.001271740 0.000051262 0.000252949 0.000277058 0.000354770 0.000395595 0.000467797 0.000600584 0.000772296 0.000909927 0.001103246 0.001232153 0.001258773 0.001355196 0.001383769 0.001643888 0.001711479 0.001781913 0.001922058 0.002123623 0.002436854 0.002582675 0.002652369 0.002809098 0.003091173 0.003237319 0.003408132 0.003800822 0.003923669 0.004320536 0.004697766 0.004805081 0.004966615 0.005816873 0.005941435 0.006174458 0.006513467 0.006771930 0.007485592 0.007866692 0.008089209 0.009065801 0.009362940 0.009808708 0.010644999 0.010911945 0.011423104 0.011677184 0.011936552 0.012752495 0.013035969 0.013836062 0.014238257 0.014890018 0.015260466 0.015520383 0.015586418 0.015887018 0.016663680 0.017257934 0.017397661 0.018727420 0.019145302 0.019563049 0.020383753 0.021137221 0.021266204 0.022303626 0.023068868 0.024815869 0.025853090 0.026468020 0.026752175 0.027120273 0.028812341 0.029299847 0.031286410 0.032422610 0.033191165 0.033591638 0.035046342 0.035524280 0.036225479 0.038495640 0.039007361 0.040313665 0.040849913 0.041507612 0.044313895 0.045122843 0.046189737 0.046966624 0.049102515 0.050201846 0.050668169 0.050906584 0.051168926 0.052444907 0.052486043 0.052821558 0.052880429 0.054231789 0.054632165 0.055276406 0.055964595 0.056410290 0.056491046 0.056921786 0.058223704 0.059983755 0.060508503 0.061339588 0.061781571 0.062846095 0.063628427 0.064916269 0.065476966 0.066254747 0.067506163 0.068589966 0.070009086 0.072504882 0.074141233 0.074276522 0.076031469 0.077408776 0.083253637 0.084660593 0.086610450 0.086891063 0.087529149 0.090243169 0.090674690 0.092915931 0.094565539 0.095155862 0.096285767 0.096927112 0.097673561 0.098687757 0.099452536 0.100117789 0.102246132 0.102566767 0.102924353 0.103322024 0.103891952 0.104320479 0.106671157 0.107263876 0.107608119 0.108965250 0.110135340 0.111684011 0.112193576 0.113076975 0.114713024 0.116064776 0.118792143 0.120497759 0.121221979 0.122104069 0.123774542 0.125149833 0.126191469 0.126797572 0.131487683 0.134738064 0.135446047 0.142305396 0.143394167 0.146780755 0.147103299 0.149566145 0.151776067 0.154392147 0.155552171 0.156526058 0.160824279 0.161639182 0.173172794 0.173705587 0.178650715 0.183890017 0.184874939 0.188870401 0.189905468 0.193727652 0.193829718 0.198121761 0.199656126 0.204863007 0.206741915 0.206928554 0.209670928 0.211056495 0.215125447 0.216764553 0.217520615 0.220307077 0.224754844 0.226159498 0.231717179 0.234673542 0.235318032 0.235567616 0.244436022 0.255608678 0.256889116 0.262641771 0.269474291 0.279399953 0.282808371 0.286129243 0.291228106 0.295736485 0.304152659 0.305460241 0.307032449 0.313152839 0.316205505 0.316473202 0.321846917 0.329100169 0.332000591 0.349728936 0.351588638 0.354456715 0.355298091 0.359795535 0.362259199 0.362766779 0.383220751 0.385491555 0.391475212 0.410193951 0.425181665 0.429541756 0.453071315 0.468364479 0.473657524 0.476703617 0.482354983 0.486743557 0.489896870 0.508391062 0.514138178 0.534753596 0.565875666 0.572533338 0.591517016 0.593162533 0.606168413 0.607341391 0.643621736 0.645908348 0.647880153 0.674128164 0.677103619 0.684575590 0.691325079 0.692606053 0.699178539 0.703961826 0.716794154 0.741150334 0.751145530 0.758151707 0.764909639 0.772217079 0.778639977 0.810388171 0.812492410 0.815254966 0.821524043 0.821674811 0.827621355 0.831205599 0.835287204 0.836371580 0.845051007 0.845633970 0.848035208 0.857814540 0.864449069 0.864907898 0.873036580 0.880838397 0.884157636 0.889187671 0.891762509 0.900432727 0.903567810 0.920306532 0.923263210 0.932605494 0.934812556 0.964523074 0.975596890 0.985585233 1.000884635 1.017032501 1.026626591 1.041164644 1.049477225 1.057063323 1.067652851 1.086275079 1.088391350 1.103264793 1.105989081 1.112143564 1.119363398 1.123373291 1.135176808 1.142294417 1.171014182 1.173854098 1.180771903 1.185960427 1.188549397 1.194551907 1.223504085 1.226523917 1.273761593 1.300332792 1.318798613 1.327659598 1.332174478 1.333706944 1.335498082 1.339896436 1.342552822 1.344849807 1.358356011 1.375757413 1.382770545 1.383832668 1.408564739 1.419459435 1.433056350 1.551347847 1.663419697 1.774511810</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">155</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34690384" y3="0.013686" z3="-0.18257219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39500261" y3="0.14226499" z3="0.41587833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65001893" y3="0.41314054" z3="-0.33847834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71558789" y3="1.20540331" z3="-2.24260037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38805974" y3="0.39365909" z3="-1.16954658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70501495" y3="0.81865857" z3="-3.63047543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.60951213" y3="1.72008246" z3="-3.09947263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.33821868" y3="2.56807783" z3="-4.54536943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.52829612" y3="1.22501018" z3="-4.32763868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45246065" y3="2.9069134" z3="-5.09166919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91244716" y3="-0.51286615" z3="-3.42935078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10189814" y3="-0.00824748" z3="-0.9853727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4127648" y3="-1.15060639" z3="-1.99121265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9410447" y3="-1.04315193" z3="-1.80094541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1342632" y3="-2.46669046" z3="-1.85854689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.11917293" y3="-3.57890198" z3="0.63149377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01446996" y3="-5.30932907" z3="-4.75419703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.21751245" y3="-5.03081301" z3="-3.72255939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8211332" y3="-4.28929932" z3="-1.11808973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80972306" y3="-4.64170163" z3="-2.86487966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.53989623" y3="-5.07648177" z3="-3.27684322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84238625" y3="-4.69949669" z3="-1.9708668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51922282" y3="-4.2866637" z3="-1.54605302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84935664" y3="-4.59986085" z3="-3.20150579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34044433" y3="-5.37856445" z3="-3.95501758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8816582" y3="-4.70435318" z3="-1.63878554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.00931149" y3="-3.82341595" z3="0.1966592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14796048" y3="-3.62108995" z3="0.84707786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03312481" y3="-4.09102477" z3="0.41583774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.13937749" y3="-3.48752356" z3="2.31408769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.1929801" y3="-3.31574009" z3="5.11273969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33184505" y3="-3.7066841" z3="3.01935113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97324394" y3="-3.18665361" z3="3.0340774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.99772769" y3="-3.1020282" z3="4.42329188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.35796066" y3="-3.62269118" z3="4.40855254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2460925" y3="-3.95321389" z3="2.47191125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.01702598" y3="-3.03806959" z3="2.52709923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07085448" y3="-2.88897082" z3="4.96249585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29329582" y3="-3.80525861" z3="4.94477633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21087906" y3="-3.25768372" z3="6.20456043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4426835" y3="-3.94195604" z3="-0.63714287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20771052" y3="-3.44667669" z3="-1.08762222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49138299" y3="0.22179039" z3="-4.67789241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08208769" y3="-1.69862124" z3="0.00027596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.87955867" y3="-0.94667781" z3="1.15622378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8055571" y3="-0.30355456" z3="1.46305518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35190941" y3="0.60442932" z3="1.16969167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40742591" y3="1.44421854" z3="-0.48892105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01690197" y3="-0.620185" z3="1.42775549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.40463611" y3="1.85482496" z3="2.5642795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8346366" y3="-0.93137418" z3="2.07540189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.57465341" y3="-0.32251221" z3="3.33009453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17183026" y3="0.72305419" z3="-1.29007594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37356745" y3="2.22596646" z3="-0.50575175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38106451" y3="1.93219067" z3="-0.67350645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01687172" y3="-0.96249182" z3="2.47635146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.99197034" y3="-0.15318201" z3="1.20794896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.92002896" y3="-1.47831386" z3="0.74219136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.46518093" y3="1.35680252" z3="3.54819858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.51221328" y3="2.4721986" z3="2.55535289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.26707736" y3="2.53835316" z3="2.46613945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.70657474" y3="-0.78751636" z3="3.8236763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.4788059" y3="-0.48989323" z3="3.93081164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.39744887" y3="0.75878985" z3="3.20916034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85458595" y3="-0.74002698" z3="1.00517008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40289817" y3="-2.05892277" z3="0.86929424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.74891055" y3="-2.69362222" z3="1.91789985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56397453" y3="-1.99692013" z3="3.10909071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06896642" y3="-0.71506005" z3="3.30087637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72320193" y3="-0.09396068" z3="2.24157842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48777516" y3="-2.55742102" z3="-0.09957917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33215678" y3="-3.69490768" z3="1.79651209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70062603" y3="-2.58222132" z3="4.13945298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90296397" y3="-0.20207154" z3="4.24747622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08486326" y3="0.93124053" z3="2.35370173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.83209933" y3="0.44625058" z3="-4.27527979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.81265036" y3="-0.51709633" z3="-4.47263773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45859963" y3="-1.70940901" z3="-5.09281807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1652553" y3="-1.9444165" z3="-5.54870357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.80737509" y3="-0.97745791" z3="-5.33172918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.08368169" y3="1.36997077" z3="-3.74819988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83699328" y3="-0.36717434" z3="-4.13073651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.47088404" y3="-2.75528128" z3="-5.24905434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06971875" y3="-2.8852725" z3="-6.04626159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83313536" y3="-1.16657096" z3="-5.65127591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37730912" y3="-1.87822376" z3="5.07501726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31522634" y3="-3.72219597" z3="3.98078942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24191252" y3="-3.65213539" z3="-6.03191119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4787014" y3="-2.67321287" z3="-4.57526311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06352067" y3="1.14159382" z3="-1.48713142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09463491" y3="1.5317641" z3="-2.45705603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42941734" y3="1.47978454" z3="-1.69206443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82841103" y3="2.15452419" z3="-2.81991097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16262461" y3="1.18151356" z3="-0.93623226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88304411" y3="2.40388711" z3="-2.96966357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54304316" y3="2.21292233" z3="-3.62289195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87221313" y3="2.51471967" z3="-3.79958776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81491444" y3="2.48778912" z3="-4.38956002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19499412" y3="3.03135136" z3="-4.70793645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36693112" y3="3.12526185" z3="-3.27134036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24040812" y3="3.5414393" z3="-4.03987159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17379015" y3="4.13243332" z3="-2.66957766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91000868" y3="5.46634957" z3="-2.86714007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01305288" y3="3.83870221" z3="-2.03705522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54699658" y3="6.21816574" z3="-2.39366632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.00084513" y3="4.92990156" z3="-4.2369394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.81998207" y3="5.87536148" z3="-3.67160834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.14034236" y3="5.23089158" z3="-4.8423091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62436745" y3="6.94028403" z3="-3.82699535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48586544" y3="-2.17753115" z3="-0.2881746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4714368" y3="-2.97730754" z3="-1.04767499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99829441" y3="-2.55049309" z3="0.61262382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10748514" y3="-1.36122957" z3="-0.70294366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.20028265" y3="-1.4072716" z3="-1.18738366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34096661" y3="-0.36612659" z3="-1.53280614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.12064273" y3="-1.53566026" z3="-1.00092089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.46008099" y3="-2.06171872" z3="-2.0331678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3469,.0137,-.1826;7.395,.1423,.4159;6.65,.4131,-.3385;4.7156,1.2054,-2.2426;4.3881,.3937,-1.1695;2.705,.8187,-3.6305;3.6095,1.7201,-3.0995;1.3382,2.5681,-4.5454;1.5283,1.225,-4.3276;.4525,2.9069,-5.0917;2.9124,-.5129,-3.4294;3.1019,-.0082,-.9854;2.4128,-1.1506,-1.9912;.941,-1.0432,-1.8009;3.1343,-2.4667,-1.8585;-.1192,-3.5789,.6315;.0145,-5.3093,-4.7542;-.2175,-5.0308,-3.7226;-.8211,-4.2893,-1.1181;.8097,-4.6417,-2.8649;-1.5399,-5.0765,-3.2768;-1.8424,-4.6995,-1.9709;.5192,-4.2867,-1.5461;1.8494,-4.5999,-3.2015;-2.3404,-5.3786,-3.955;-2.8817,-4.7044,-1.6388;-1.0093,-3.8234,.1967;-2.148,-3.6211,.8471;-3.0331,-4.091,.4158;-2.1394,-3.4875,2.3141;-2.193,-3.3157,5.1127;-3.3318,-3.7067,3.0194;-.9732,-3.1867,3.0341;-.9977,-3.102,4.4233;-3.358,-3.6227,4.4086;-4.2461,-3.9532,2.4719;-.017,-3.0381,2.5271;-.0709,-2.889,4.9625;-4.2933,-3.8053,4.9448;-2.2109,-3.2577,6.2046;1.4427,-3.942,-.6371;2.2077,-3.4467,-1.0876;.4914,.2218,-4.6779;-3.0821,-1.6986,.0003;-2.8796,-.9467,1.1562;-1.8056,-.3036,1.4631;-.3519,.6044,1.1697;-.4074,1.4442,-.4889;1.0169,-.6202,1.4278;-.4046,1.8548,2.5643;-3.8346,-.9314,2.0754;-3.5747,-.3225,3.3301;-.1718,.7231,-1.2901;.3736,2.226,-.5058;-1.3811,1.9322,-.6735;1.0169,-.9625,2.4764;1.992,-.1532,1.2079;.92,-1.4783,.7422;-.4652,1.3568,3.5482;.5122,2.4722,2.5554;-1.2671,2.5384,2.4661;-2.7066,-.7875,3.8237;-4.4788,-.4899,3.9308;-3.3974,.7588,3.2092;4.8546,-.74,1.0052;4.4029,-2.0589,.8693;3.7489,-2.6936,1.9179;3.564,-1.9969,3.1091;4.069,-.7151,3.3009;4.7232,-.094,2.2416;4.4878,-2.5574,-.0996;3.3322,-3.6949,1.7965;2.7006,-2.5822,4.1395;3.903,-.2021,4.2475;5.0849,.9312,2.3537;-.8321,.4463,-4.2753;-1.8127,-.5171,-4.4726;-1.4586,-1.7094,-5.0928;-.1653,-1.9444,-5.5487;.8074,-.9775,-5.3317;-1.0837,1.37,-3.7482;-2.837,-.3672,-4.1307;-2.4709,-2.7553,-5.2491;.0697,-2.8853,-6.0463;1.8331,-1.1666,-5.6513;2.3773,-1.8782,5.075;2.3152,-3.7222,3.9808;-2.2419,-3.6521,-6.0319;-3.4787,-2.6732,-4.5753;7.0635,1.1416,-1.4871;6.0946,1.5318,-2.4571;8.4294,1.4798,-1.6921;8.8284,2.1545,-2.8199;9.1626,1.1815,-.9362;9.883,2.4039,-2.9697;6.543,2.2129,-3.6229;7.8722,2.5147,-3.7996;5.8149,2.4878,-4.3896;8.195,3.0314,-4.7079;3.3669,3.1253,-3.2713;2.2404,3.5414,-4.0399;4.1738,4.1324,-2.6696;3.91,5.4663,-2.8671;5.0131,3.8387,-2.0371;4.547,6.2182,-2.3937;2.0008,4.9299,-4.2369;2.82,5.8754,-3.6716;1.1403,5.2309,-4.8423;2.6244,6.9403,-3.827;-4.4859,-2.1775,-.2882;-4.4714,-2.9773,-1.0477;-4.9983,-2.5505,.6126;-5.1075,-1.3612,-.7029;-2.2003,-1.4073,-1.1874;-2.341,-.3661,-1.5328;-1.1206,-1.5357,-1.0009;-2.4601,-2.0617,-2.0332;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650329968523</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003296188551 0.000448235955 0.017259354217 0.005337911043</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030503540 -0.001329858 0.000085699 0.000257541 0.000278612 0.000357380 0.000396787 0.000467820 0.000600240 0.000780417 0.000911452 0.001103195 0.001234491 0.001258793 0.001361858 0.001385163 0.001643928 0.001711708 0.001785949 0.001941075 0.002125056 0.002445612 0.002587198 0.002650642 0.002809563 0.003095056 0.003237656 0.003407830 0.003800583 0.003926739 0.004325410 0.004705957 0.004806053 0.004966316 0.005817016 0.005948712 0.006177646 0.006522820 0.006771879 0.007485298 0.007868010 0.008094456 0.009080612 0.009362895 0.009813974 0.010649126 0.010976726 0.011428949 0.011684516 0.011943706 0.012782121 0.013036572 0.013843735 0.014247474 0.014897020 0.015260553 0.015522702 0.015586818 0.015895390 0.016703949 0.017260941 0.017413419 0.018734191 0.019217307 0.019567970 0.020408926 0.021140761 0.021281265 0.022304475 0.023069369 0.024837952 0.025859642 0.026477955 0.026785617 0.027120640 0.028813043 0.029309159 0.031350827 0.032575357 0.033193829 0.033610848 0.035098290 0.035524350 0.036351705 0.038496082 0.039074917 0.040323098 0.040857860 0.041599324 0.044317223 0.045124198 0.046198334 0.047009190 0.049103936 0.050204037 0.050668402 0.050922995 0.051169000 0.052449856 0.052488135 0.052824475 0.052880561 0.054232326 0.054632484 0.055277798 0.055964784 0.056414324 0.056492383 0.056930619 0.058229886 0.060056633 0.060511666 0.061339639 0.061787931 0.062850049 0.063636455 0.064921564 0.065479858 0.066258232 0.067513858 0.068610265 0.070023675 0.072514775 0.074153983 0.074282348 0.076046924 0.077430021 0.083255219 0.084661661 0.086623508 0.086910201 0.087528834 0.090244168 0.090680064 0.092918911 0.094569377 0.095165715 0.096285871 0.096934291 0.097674517 0.098688850 0.099452905 0.100119058 0.102252099 0.102572464 0.102927436 0.103322786 0.103892120 0.104334146 0.106687607 0.107279086 0.107656163 0.108965211 0.110153901 0.111685081 0.112227742 0.113077486 0.114714729 0.116065518 0.118792384 0.120524398 0.121224389 0.122111686 0.123795113 0.125158047 0.126198440 0.126801204 0.131487094 0.134748181 0.135446235 0.142313740 0.143398783 0.146781134 0.147104205 0.149568488 0.151776672 0.154396980 0.155552390 0.156530904 0.160825384 0.161639107 0.173181174 0.173707413 0.178703145 0.183892134 0.184888944 0.188872666 0.189907334 0.193746655 0.193831143 0.198170054 0.199664550 0.204864691 0.206743506 0.206949116 0.209672578 0.211073430 0.215153374 0.216914981 0.217524205 0.220307189 0.224768469 0.226173257 0.231727406 0.234685685 0.235319573 0.235573128 0.244440106 0.255630466 0.256900375 0.262650408 0.269474304 0.279510682 0.282808408 0.286129907 0.291241011 0.295742088 0.304152550 0.305460678 0.307046734 0.313153806 0.316205659 0.316489208 0.321846979 0.329100339 0.332030661 0.349798797 0.351595617 0.354456435 0.355300985 0.359797635 0.362288752 0.362773189 0.383248366 0.385506844 0.391513907 0.410240944 0.425188676 0.429565926 0.453132692 0.468418305 0.473776834 0.477534584 0.482365393 0.486750548 0.489912028 0.508394807 0.514244013 0.534792289 0.565891044 0.572565376 0.591604989 0.593170952 0.606168476 0.607341426 0.643625075 0.645908431 0.647881500 0.674133863 0.677130127 0.684586876 0.691325064 0.692618260 0.699178350 0.703969243 0.716810794 0.741154858 0.751147122 0.758167034 0.764915978 0.772221996 0.778655611 0.810393005 0.812509486 0.815345766 0.821524129 0.821701061 0.827740158 0.831206493 0.835290628 0.836372394 0.845052351 0.845641803 0.848037595 0.857817828 0.864452041 0.864998677 0.873038620 0.880845322 0.884167857 0.889194239 0.891763082 0.900436249 0.903622957 0.920309178 0.923288141 0.932610835 0.934910909 0.964576119 0.975598072 0.985586723 1.000892893 1.017047162 1.026699325 1.041187187 1.049632383 1.057080315 1.067653540 1.086340411 1.088401679 1.103277393 1.105989121 1.112148166 1.119365222 1.123374148 1.135184728 1.142325561 1.171019200 1.173876616 1.180778154 1.185963840 1.188606016 1.194719734 1.223521780 1.226621673 1.273868358 1.300512551 1.318816815 1.327669731 1.332232560 1.333751577 1.335499140 1.339902764 1.342553089 1.344850033 1.358359441 1.375967601 1.382787130 1.383833042 1.408565994 1.419459519 1.433063026 1.551359935 1.664113079 1.774513475</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">156</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34647032" y3="0.01730529" z3="-0.18502583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39523848" y3="0.14462123" z3="0.41474234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65067478" y3="0.41621127" z3="-0.3399465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71766438" y3="1.2085023" z3="-2.24599459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38835072" y3="0.39794553" z3="-1.17243049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70767984" y3="0.8239855" z3="-3.63340034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61334844" y3="1.72426849" z3="-3.10412964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34202559" y3="2.57565192" z3="-4.54901859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53190701" y3="1.23129161" z3="-4.33076228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45772746" y3="2.91345596" z3="-5.09818984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91360483" y3="-0.50801038" z3="-3.43121348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10170614" y3="-0.00133133" z3="-0.98781996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41109534" y3="-1.14361733" z3="-1.99282424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93947014" y3="-1.03359021" z3="-1.80371563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.13019674" y3="-2.46095894" z3="-1.85851998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12135185" y3="-3.58337089" z3="0.63651088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.01340129" y3="-5.30320748" z3="-4.753073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.21795237" y3="-5.02827832" z3="-3.72051448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82174297" y3="-4.29281255" z3="-1.11417795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80844021" y3="-4.63625308" z3="-2.8632393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5396283" y3="-5.07953994" z3="-3.27368472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84259255" y3="-4.70497232" z3="-1.96697194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51861464" y3="-4.28503722" z3="-1.54338505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84470782" y3="-4.58379221" z3="-3.2004221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34125889" y3="-5.38074177" z3="-3.95226434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88520736" y3="-4.70664537" z3="-1.63457827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01099494" y3="-3.82837646" z3="0.20107007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.14996574" y3="-3.62612932" z3="0.85086666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03505744" y3="-4.0960147" z3="0.41940163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14232014" y3="-3.49149511" z3="2.31771884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.19637768" y3="-3.31665882" z3="5.11619855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3351973" y3="-3.70960004" z3="3.02295795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97642892" y3="-3.18984418" z3="3.03760005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00107979" y3="-3.10349269" z3="4.42669022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36151182" y3="-3.62420154" z3="4.41207826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2489643" y3="-3.95696468" z3="2.47579451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02008096" y3="-3.04199299" z3="2.53076293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07339851" y3="-2.89055587" z3="4.96579822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.29682264" y3="-3.806326" z3="4.94852792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21424983" y3="-3.25755201" z3="6.20802441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44212674" y3="-3.93734156" z3="-0.6351753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.2036963" y3="-3.43903278" z3="-1.08582193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49490204" y3="0.22613171" z3="-4.68132279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08211565" y3="-1.70365149" z3="0.00171668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88381317" y3="-0.95224147" z3="1.15860335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81154494" y3="-0.30859083" z3="1.46980747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35835226" y3="0.59913446" z3="1.17737623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41693501" y3="1.4453176" z3="-0.47801927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01159003" y3="-0.62588945" z3="1.42575306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.40744626" y3="1.84312305" z3="2.57775113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84197307" y3="-0.93756185" z3="2.07456868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.5866554" y3="-0.3272785" z3="3.32976791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17893193" y3="0.72676437" z3="-1.28085569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36615091" y3="2.22831885" z3="-0.49398028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39155566" y3="1.93246196" z3="-0.6607837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01661545" y3="-0.97049959" z3="2.47338371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98467073" y3="-0.1569374" z3="1.2031456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.91380815" y3="-1.4823235" z3="0.73864724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.46804623" y3="1.34011971" z3="3.55907464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.51065187" y3="2.45864079" z3="2.57091294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.26875633" y3="2.5284951" z3="2.48339881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.71694128" y3="-0.78792614" z3="3.82489571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49053402" y3="-0.49855372" z3="3.929263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.41406684" y3="0.75410214" z3="3.20789552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85201439" y3="-0.73579971" z3="1.00172907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40263877" y3="-2.0552436" z3="0.86565574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.74802129" y3="-2.69094035" z3="1.91312224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55916377" y3="-1.99437252" z3="3.10251474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06450497" y3="-0.71193153" z3="3.29667572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71887971" y3="-0.0897397" z3="2.23814276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49559631" y3="-2.55499874" z3="-0.09859685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33640307" y3="-3.69326999" z3="1.79375845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69859904" y3="-2.58118354" z3="4.13446632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90236593" y3="-0.20049887" z3="4.24748111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08267612" y3="0.93572555" z3="2.35309377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8278817" y3="0.449991" z3="-4.27566564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80814428" y3="-0.51412512" z3="-4.46913588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45478553" y3="-1.70670933" z3="-5.08909202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.16254192" y3="-1.94099615" z3="-5.5491217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8101268" y3="-0.97316458" z3="-5.33533994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07857084" y3="1.37381326" z3="-3.74762891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.83166808" y3="-0.36473664" z3="-4.12411564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46674782" y3="-2.75369429" z3="-5.24215051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07185816" y3="-2.88206285" z3="-6.04683473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83513659" y3="-1.1620006" z3="-5.65757197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38095558" y3="-1.87926029" z3="5.07627238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31331214" y3="-3.72028754" z3="3.97453013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23946178" y3="-3.65064197" z3="-6.02533164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.47263613" y3="-2.67187591" z3="-4.56507972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06565697" y3="1.14294284" z3="-1.4890371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09764404" y3="1.533229" z3="-2.45982365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43189895" y3="1.47734471" z3="-1.69417281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83232443" y3="2.15015469" z3="-2.82254311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16405107" y3="1.17751387" z3="-0.93809765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88703322" y3="2.39565008" z3="-2.97259182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5474604" y3="2.21183815" z3="-3.62631305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87717041" y3="2.51129814" z3="-3.80283192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81961445" y3="2.48587239" z3="-4.39369966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2009862" y3="3.02645529" z3="-4.71161033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3733011" y3="3.12884851" z3="-3.27968145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24676773" y3="3.54619316" z3="-4.048206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18184263" y3="4.13553809" z3="-2.68029801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91891107" y3="5.47042074" z3="-2.87925337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01948996" y3="3.84250041" z3="-2.04561948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55596786" y3="6.22324756" z3="-2.40573016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01015977" y3="4.93360784" z3="-4.24952735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83001211" y3="5.87926489" z3="-3.68526813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.14933326" y3="5.23559941" z3="-4.85433036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63642805" y3="6.94377996" z3="-3.84308177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48526037" y3="-2.18324765" z3="-0.29045085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47001748" y3="-2.98329145" z3="-1.05101932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99963792" y3="-2.5567105" z3="0.61000323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.1059885" y3="-1.36665829" z3="-0.7055693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19683737" y3="-1.41112434" z3="-1.18294743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33647841" y3="-0.36989489" z3="-1.52788362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11760776" y3="-1.53971162" z3="-0.9935757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45406116" y3="-2.06464731" z3="-2.03009996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3465,.0173,-.185;7.3952,.1446,.4147;6.6507,.4162,-.3399;4.7177,1.2085,-2.246;4.3884,.3979,-1.1724;2.7077,.824,-3.6334;3.6133,1.7243,-3.1041;1.342,2.5757,-4.549;1.5319,1.2313,-4.3308;.4577,2.9135,-5.0982;2.9136,-.508,-3.4312;3.1017,-.0013,-.9878;2.4111,-1.1436,-1.9928;.9395,-1.0336,-1.8037;3.1302,-2.461,-1.8585;-.1214,-3.5834,.6365;.0134,-5.3032,-4.7531;-.218,-5.0283,-3.7205;-.8217,-4.2928,-1.1142;.8084,-4.6363,-2.8632;-1.5396,-5.0795,-3.2737;-1.8426,-4.705,-1.967;.5186,-4.285,-1.5434;1.8447,-4.5838,-3.2004;-2.3413,-5.3807,-3.9523;-2.8852,-4.7066,-1.6346;-1.011,-3.8284,.2011;-2.15,-3.6261,.8509;-3.0351,-4.096,.4194;-2.1423,-3.4915,2.3177;-2.1964,-3.3167,5.1162;-3.3352,-3.7096,3.023;-.9764,-3.1898,3.0376;-1.0011,-3.1035,4.4267;-3.3615,-3.6242,4.4121;-4.249,-3.957,2.4758;-.0201,-3.042,2.5308;-.0734,-2.8906,4.9658;-4.2968,-3.8063,4.9485;-2.2142,-3.2576,6.208;1.4421,-3.9373,-.6352;2.2037,-3.439,-1.0858;.4949,.2261,-4.6813;-3.0821,-1.7037,.0017;-2.8838,-.9522,1.1586;-1.8115,-.3086,1.4698;-.3584,.5991,1.1774;-.4169,1.4453,-.478;1.0116,-.6259,1.4258;-.4074,1.8431,2.5778;-3.842,-.9376,2.0746;-3.5867,-.3273,3.3298;-.1789,.7268,-1.2809;.3662,2.2283,-.494;-1.3916,1.9325,-.6608;1.0166,-.9705,2.4734;1.9847,-.1569,1.2031;.9138,-1.4823,.7386;-.468,1.3401,3.5591;.5107,2.4586,2.5709;-1.2688,2.5285,2.4834;-2.7169,-.7879,3.8249;-4.4905,-.4986,3.9293;-3.4141,.7541,3.2079;4.852,-.7358,1.0017;4.4026,-2.0552,.8657;3.748,-2.6909,1.9131;3.5592,-1.9944,3.1025;4.0645,-.7119,3.2967;4.7189,-.0897,2.2381;4.4956,-2.555,-.0986;3.3364,-3.6933,1.7938;2.6986,-2.5812,4.1345;3.9024,-.2005,4.2475;5.0827,.9357,2.3531;-.8279,.45,-4.2757;-1.8081,-.5141,-4.4691;-1.4548,-1.7067,-5.0891;-.1625,-1.941,-5.5491;.8101,-.9732,-5.3353;-1.0786,1.3738,-3.7476;-2.8317,-.3647,-4.1241;-2.4667,-2.7537,-5.2422;.0719,-2.8821,-6.0468;1.8351,-1.162,-5.6576;2.381,-1.8793,5.0763;2.3133,-3.7203,3.9745;-2.2395,-3.6506,-6.0253;-3.4726,-2.6719,-4.5651;7.0657,1.1429,-1.489;6.0976,1.5332,-2.4598;8.4319,1.4773,-1.6942;8.8323,2.1502,-2.8225;9.1641,1.1775,-.9381;9.887,2.3957,-2.9726;6.5475,2.2118,-3.6263;7.8772,2.5113,-3.8028;5.8196,2.4859,-4.3937;8.201,3.0265,-4.7116;3.3733,3.1288,-3.2797;2.2468,3.5462,-4.0482;4.1818,4.1355,-2.6803;3.9189,5.4704,-2.8793;5.0195,3.8425,-2.0456;4.556,6.2232,-2.4057;2.0102,4.9336,-4.2495;2.83,5.8793,-3.6853;1.1493,5.2356,-4.8543;2.6364,6.9438,-3.8431;-4.4853,-2.1832,-.2905;-4.47,-2.9833,-1.051;-4.9996,-2.5567,.61;-5.106,-1.3667,-.7056;-2.1968,-1.4111,-1.1829;-2.3365,-.3699,-1.5279;-1.1176,-1.5397,-.9936;-2.4541,-2.0646,-2.0301;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650345914526</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003381253715 0.000456897692 0.020171788271 0.005337436775</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030503000 -0.001223850 0.000069433 0.000264020 0.000283031 0.000358112 0.000396740 0.000467779 0.000600698 0.000780332 0.000911547 0.001104076 0.001238606 0.001258925 0.001372068 0.001385829 0.001647168 0.001711765 0.001788525 0.001959100 0.002130975 0.002456591 0.002598877 0.002652710 0.002809657 0.003094418 0.003238439 0.003408436 0.003800725 0.003931025 0.004328971 0.004710658 0.004806654 0.004966432 0.005817820 0.005961315 0.006177483 0.006525553 0.006772263 0.007485241 0.007872000 0.008098848 0.009089348 0.009367728 0.009817731 0.010658411 0.011042634 0.011432876 0.011701611 0.011951968 0.012803995 0.013037282 0.013852732 0.014254847 0.014902437 0.015261605 0.015523060 0.015586659 0.015909723 0.016742587 0.017263883 0.017425961 0.018743551 0.019258399 0.019569106 0.020446496 0.021145275 0.021290534 0.022304399 0.023069411 0.024858271 0.025863036 0.026491741 0.026801553 0.027122377 0.028819728 0.029317256 0.031387964 0.032736114 0.033203052 0.033628319 0.035165080 0.035525342 0.036565163 0.038497267 0.039171340 0.040342545 0.040858226 0.041679017 0.044318468 0.045123949 0.046204985 0.047057608 0.049108140 0.050210521 0.050668454 0.050945970 0.051169055 0.052455495 0.052490133 0.052825895 0.052880560 0.054232650 0.054632716 0.055284024 0.055964954 0.056419198 0.056492282 0.056935330 0.058230449 0.060131393 0.060511969 0.061342361 0.061796495 0.062849630 0.063667529 0.064931209 0.065482826 0.066261846 0.067529025 0.068637506 0.070027051 0.072520803 0.074162164 0.074288887 0.076057306 0.077458769 0.083257503 0.084663297 0.086622767 0.086935380 0.087533332 0.090247584 0.090681627 0.092921514 0.094571981 0.095168325 0.096287397 0.096942288 0.097675671 0.098688892 0.099452910 0.100122824 0.102259696 0.102577365 0.102932192 0.103322884 0.103892948 0.104356467 0.106692231 0.107289549 0.107712381 0.108965428 0.110165104 0.111686549 0.112258866 0.113077509 0.114715456 0.116068044 0.118794756 0.120542476 0.121227631 0.122123758 0.123801713 0.125169319 0.126203606 0.126802677 0.131497583 0.134752240 0.135456286 0.142327303 0.143400341 0.146781511 0.147108915 0.149569789 0.151781614 0.154403134 0.155553896 0.156548516 0.160825452 0.161639413 0.173196431 0.173708919 0.178763378 0.183893437 0.184896725 0.188872233 0.189920349 0.193760186 0.193831364 0.198205058 0.199698478 0.204866832 0.206748103 0.206970720 0.209673123 0.211082779 0.215162473 0.217054012 0.217534632 0.220307872 0.224791209 0.226183128 0.231734440 0.234696343 0.235322552 0.235584512 0.244441574 0.255652100 0.256927092 0.262651520 0.269475570 0.279593251 0.282811023 0.286130807 0.291251348 0.295745676 0.304152632 0.305461129 0.307056289 0.313153707 0.316205721 0.316514924 0.321848220 0.329100298 0.332064078 0.349856675 0.351616174 0.354461474 0.355304739 0.359798437 0.362373061 0.362793520 0.383271682 0.385550719 0.391528943 0.410268739 0.425188669 0.429587981 0.453149569 0.468449392 0.473881153 0.478668471 0.482374023 0.486759159 0.489955126 0.508408214 0.514405352 0.534826476 0.565926425 0.572587892 0.591676527 0.593203301 0.606173892 0.607350614 0.643625542 0.645914179 0.647881855 0.674134969 0.677174127 0.684589382 0.691325584 0.692697295 0.699187641 0.703979909 0.716823721 0.741154888 0.751149462 0.758196665 0.764917015 0.772224864 0.778671381 0.810395657 0.812514965 0.815450266 0.821525577 0.821715860 0.827814101 0.831206813 0.835300839 0.836374700 0.845060981 0.845648787 0.848041756 0.857823510 0.864452201 0.865092573 0.873046114 0.880849949 0.884189728 0.889211417 0.891766637 0.900455175 0.903667717 0.920309699 0.923298057 0.932627713 0.934975849 0.964637491 0.975605395 0.985588410 1.000897938 1.017047539 1.026790544 1.041190434 1.049795112 1.057109616 1.067653762 1.086403491 1.088406575 1.103283316 1.105990471 1.112158655 1.119367503 1.123381625 1.135188826 1.142369209 1.171020517 1.173895083 1.180783042 1.186002512 1.188714297 1.194941748 1.223530478 1.226754980 1.273996635 1.300641474 1.318825229 1.327692772 1.332356025 1.333780374 1.335507860 1.339910364 1.342553571 1.344856157 1.358362426 1.376153190 1.382793685 1.383836361 1.408567512 1.419459838 1.433066462 1.551366126 1.664804339 1.774529851</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">157</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34718369" y3="0.02119836" z3="-0.18677542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39569059" y3="0.14485559" z3="0.41239229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65153842" y3="0.41732928" z3="-0.34230155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71990692" y3="1.21262941" z3="-2.24827337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3895338" y3="0.40314706" z3="-1.17415225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71107865" y3="0.82670508" z3="-3.6378867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6164004" y3="1.72776299" z3="-3.10815356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34870325" y3="2.57614823" z3="-4.56030556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.53631966" y3="1.23318232" z3="-4.33806277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46414322" y3="2.91526859" z3="-5.10837219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91492094" y3="-0.50454537" z3="-3.43209635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10229788" y3="0.00557639" z3="-0.98940584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4099251" y3="-1.13644448" z3="-1.99332471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93844807" y3="-1.0227832" z3="-1.80585447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12626825" y3="-2.45502193" z3="-1.85657087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12433908" y3="-3.58584763" z3="0.64201619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00991222" y3="-5.29872316" z3="-4.75006421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22169272" y3="-5.02413211" z3="-3.71722412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82480299" y3="-4.2934749" z3="-1.10955689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80487485" y3="-4.62950099" z3="-2.86097804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54287533" y3="-5.07998165" z3="-3.26885005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84527452" y3="-4.70843936" z3="-1.96119868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51488484" y3="-4.27968652" z3="-1.54061385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84402051" y3="-4.5802549" z3="-3.20019871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34243005" y3="-5.38578663" z3="-3.94637028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88378026" y3="-4.72171434" z3="-1.62696543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01371688" y3="-3.83172505" z3="0.20663677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15292474" y3="-3.62882385" z3="0.85578084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.03803012" y3="-4.09821906" z3="0.42396125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14570864" y3="-3.4933503" z3="2.3225317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20040575" y3="-3.3158724" z3="5.12080335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.33866181" y3="-3.7101875" z3="3.02756073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.97978797" y3="-3.19240659" z3="3.04259237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00442975" y3="-3.10519649" z3="4.43163504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36544766" y3="-3.62308412" z3="4.41655315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25204476" y3="-3.95802637" z3="2.48035635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02284176" y3="-3.04696485" z3="2.53602196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07627992" y3="-2.89357523" z3="4.97063198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30108743" y3="-3.80369752" z3="4.95277272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.21854772" y3="-3.25579522" z3="6.21257864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43726511" y3="-3.92901723" z3="-0.63299093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.20027471" y3="-3.43122088" z3="-1.08450389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.49866266" y3="0.22926525" z3="-4.68466942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08263995" y3="-1.70598871" z3="0.00381359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88814621" y3="-0.95514813" z3="1.16169005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81759716" y3="-0.31065654" z3="1.47690906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36094603" y3="0.59319449" z3="1.18401285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42219045" y3="1.44678151" z3="-0.46749463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00789866" y3="-0.63518201" z3="1.42361812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.4039061" y3="1.8294036" z3="2.59146756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84928201" y3="-0.94170604" z3="2.07432974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59943392" y3="-0.33089478" z3="3.3298533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18345757" y3="0.7329663" z3="-1.27426483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35519608" y3="2.23228202" z3="-0.47904407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39821963" y3="1.93116647" z3="-0.64726313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01621605" y3="-0.98261461" z3="2.47060684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9815237" y3="-0.16681536" z3="1.19880924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.90671273" y3="-1.49000918" z3="0.73477538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.46389097" y3="1.32018153" z3="3.56944584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.51611836" y3="2.44200204" z3="2.5871458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.26338246" y3="2.5176988" z3="2.5035706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73365883" y3="-0.79441342" z3="3.82962555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.50739711" y3="-0.4995185" z3="3.92362038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42253106" y3="0.75103962" z3="3.20924598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85341598" y3="-0.73289021" z3="1.00011114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40616003" y3="-2.05317355" z3="0.86305964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75161892" y3="-2.69023548" z3="1.90980153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5624498" y3="-1.99456108" z3="3.1009124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06340712" y3="-0.71108354" z3="3.29429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71748013" y3="-0.08741754" z3="2.23638495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49475749" y3="-2.55117305" z3="-0.10562353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33766157" y3="-3.69268534" z3="1.78683025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69903718" y3="-2.58280194" z3="4.12960697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89438994" y3="-0.19899758" z3="4.2408254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07598733" y3="0.93881877" z3="2.34973275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.82313551" y3="0.45269231" z3="-4.27646911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.80323811" y3="-0.51249937" z3="-4.46767327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.45071607" y3="-1.70519332" z3="-5.08835812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15926584" y3="-1.93906494" z3="-5.54990914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.81317516" y3="-0.97035917" z3="-5.33789266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.07300033" y3="1.37664565" z3="-3.74882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82608521" y3="-0.36369163" z3="-4.12050826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46264988" y3="-2.75282361" z3="-5.2401973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07466226" y3="-2.88020353" z3="-6.04781069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.83814797" y3="-1.15847714" z3="-5.66160278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37569556" y3="-1.88155026" z3="5.06732036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31400231" y3="-3.72236688" z3="3.96790277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23622466" y3="-3.65001629" z3="-6.02364374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4677546" y3="-2.6709365" z3="-4.56248313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06744885" y3="1.14418644" z3="-1.49117664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10016817" y3="1.53582039" z3="-2.46207787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43427841" y3="1.47777253" z3="-1.69587198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83569348" y3="2.14994704" z3="-2.8242039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16600091" y3="1.17730286" z3="-0.93956176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89096034" y3="2.39545299" z3="-2.97379188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55124678" y3="2.21452829" z3="-3.62845584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88115361" y3="2.51213335" z3="-3.80471851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82440458" y3="2.48984621" z3="-4.39618217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20579055" y3="3.02703104" z3="-4.71337764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37714792" y3="3.13279146" z3="-3.28581142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25254015" y3="3.54899088" z3="-4.05742965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18510566" y3="4.14041782" z3="-2.68646712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.924546" y3="5.47433145" z3="-2.88942361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02241177" y3="3.8473225" z3="-2.05105324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56175487" y3="6.2270855" z3="-2.41678139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01677709" y3="4.93688878" z3="-4.2606937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83698083" y3="5.88267169" z3="-3.69751936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15786297" y3="5.237651" z3="-4.8684726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6444579" y3="6.9470666" z3="-3.85783144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48420063" y3="-2.18622374" z3="-0.29364166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46395377" y3="-2.98345269" z3="-1.0554171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00120564" y3="-2.56297374" z3="0.60299207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.1045183" y3="-1.36957339" z3="-0.70934504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19395545" y3="-1.41282786" z3="-1.17844105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33216657" y3="-0.37145962" z3="-1.52318188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11517028" y3="-1.54174548" z3="-0.98667262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44900543" y3="-2.06560837" z3="-2.0267951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3472,.0212,-.1868;7.3957,.1449,.4124;6.6515,.4173,-.3423;4.7199,1.2126,-2.2483;4.3895,.4031,-1.1742;2.7111,.8267,-3.6379;3.6164,1.7278,-3.1082;1.3487,2.5761,-4.5603;1.5363,1.2332,-4.3381;.4641,2.9153,-5.1084;2.9149,-.5045,-3.4321;3.1023,.0056,-.9894;2.4099,-1.1364,-1.9933;.9384,-1.0228,-1.8059;3.1263,-2.455,-1.8566;-.1243,-3.5858,.642;.0099,-5.2987,-4.7501;-.2217,-5.0241,-3.7172;-.8248,-4.2935,-1.1096;.8049,-4.6295,-2.861;-1.5429,-5.08,-3.2689;-1.8453,-4.7084,-1.9612;.5149,-4.2797,-1.5406;1.844,-4.5803,-3.2002;-2.3424,-5.3858,-3.9464;-2.8838,-4.7217,-1.627;-1.0137,-3.8317,.2066;-2.1529,-3.6288,.8558;-3.038,-4.0982,.424;-2.1457,-3.4934,2.3225;-2.2004,-3.3159,5.1208;-3.3387,-3.7102,3.0276;-.9798,-3.1924,3.0426;-1.0044,-3.1052,4.4316;-3.3654,-3.6231,4.4166;-4.252,-3.958,2.4804;-.0228,-3.047,2.536;-.0763,-2.8936,4.9706;-4.3011,-3.8037,4.9528;-2.2185,-3.2558,6.2126;1.4373,-3.929,-.633;2.2003,-3.4312,-1.0845;.4987,.2293,-4.6847;-3.0826,-1.706,.0038;-2.8881,-.9551,1.1617;-1.8176,-.3107,1.4769;-.3609,.5932,1.184;-.4222,1.4468,-.4675;1.0079,-.6352,1.4236;-.4039,1.8294,2.5915;-3.8493,-.9417,2.0743;-3.5994,-.3309,3.3299;-.1835,.733,-1.2743;.3552,2.2323,-.479;-1.3982,1.9312,-.6473;1.0162,-.9826,2.4706;1.9815,-.1668,1.1988;.9067,-1.49,.7348;-.4639,1.3202,3.5694;.5161,2.442,2.5871;-1.2634,2.5177,2.5036;-2.7337,-.7944,3.8296;-4.5074,-.4995,3.9236;-3.4225,.751,3.2092;4.8534,-.7329,1.0001;4.4062,-2.0532,.8631;3.7516,-2.6902,1.9098;3.5624,-1.9946,3.1009;4.0634,-.7111,3.2943;4.7175,-.0874,2.2364;4.4948,-2.5512,-.1056;3.3377,-3.6927,1.7868;2.699,-2.5828,4.1296;3.8944,-.199,4.2408;5.076,.9388,2.3497;-.8231,.4527,-4.2765;-1.8032,-.5125,-4.4677;-1.4507,-1.7052,-5.0884;-.1593,-1.9391,-5.5499;.8132,-.9704,-5.3379;-1.073,1.3766,-3.7488;-2.8261,-.3637,-4.1205;-2.4626,-2.7528,-5.2402;.0747,-2.8802,-6.0478;1.8381,-1.1585,-5.6616;2.3757,-1.8816,5.0673;2.314,-3.7224,3.9679;-2.2362,-3.65,-6.0236;-3.4678,-2.6709,-4.5625;7.0674,1.1442,-1.4912;6.1002,1.5358,-2.4621;8.4343,1.4778,-1.6959;8.8357,2.1499,-2.8242;9.166,1.1773,-.9396;9.891,2.3955,-2.9738;6.5512,2.2145,-3.6285;7.8812,2.5121,-3.8047;5.8244,2.4898,-4.3962;8.2058,3.027,-4.7134;3.3771,3.1328,-3.2858;2.2525,3.549,-4.0574;4.1851,4.1404,-2.6865;3.9245,5.4743,-2.8894;5.0224,3.8473,-2.0511;4.5618,6.2271,-2.4168;2.0168,4.9369,-4.2607;2.837,5.8827,-3.6975;1.1579,5.2377,-4.8685;2.6445,6.9471,-3.8578;-4.4842,-2.1862,-.2936;-4.464,-2.9835,-1.0554;-5.0012,-2.563,.603;-5.1045,-1.3696,-.7093;-2.194,-1.4128,-1.1784;-2.3322,-.3715,-1.5232;-1.1152,-1.5417,-.9867;-2.449,-2.0656,-2.0268;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650366882386</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003104969575 0.000419833628 0.018632768895 0.005339022892</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030504935 -0.000988294 0.000057410 0.000262954 0.000290364 0.000358644 0.000396775 0.000467798 0.000600848 0.000781138 0.000911658 0.001105669 0.001245331 0.001259162 0.001373200 0.001388260 0.001654350 0.001713024 0.001788266 0.001964680 0.002138864 0.002461475 0.002600799 0.002671388 0.002810450 0.003094464 0.003243512 0.003411849 0.003806765 0.003931912 0.004328763 0.004710584 0.004807439 0.004966691 0.005818297 0.005965138 0.006180801 0.006525370 0.006773526 0.007485192 0.007876776 0.008099141 0.009091181 0.009377460 0.009817872 0.010669551 0.011071960 0.011433958 0.011713347 0.011961060 0.012812471 0.013038434 0.013856021 0.014257529 0.014903146 0.015267343 0.015535793 0.015586720 0.015926225 0.016774747 0.017265585 0.017430836 0.018757360 0.019270794 0.019569198 0.020477438 0.021147484 0.021297075 0.022304499 0.023069520 0.024864147 0.025864844 0.026510164 0.026807501 0.027126191 0.028831547 0.029320946 0.031395605 0.032844401 0.033224303 0.033641048 0.035225990 0.035526177 0.036808534 0.038514080 0.039270635 0.040373767 0.040860448 0.041735395 0.044318589 0.045130856 0.046208347 0.047092714 0.049114208 0.050222713 0.050668836 0.050963250 0.051169049 0.052460708 0.052492442 0.052826238 0.052880631 0.054232731 0.054633413 0.055297683 0.055965388 0.056423090 0.056492552 0.056936532 0.058230597 0.060189475 0.060512602 0.061354241 0.061799211 0.062852977 0.063724362 0.064942429 0.065486977 0.066263233 0.067546391 0.068653915 0.070026775 0.072526167 0.074169274 0.074290396 0.076064018 0.077480851 0.083259294 0.084665447 0.086627132 0.086952909 0.087538671 0.090251675 0.090681555 0.092921882 0.094572495 0.095168213 0.096289874 0.096946777 0.097677242 0.098688984 0.099453524 0.100128527 0.102267506 0.102580095 0.102939615 0.103322850 0.103893609 0.104387841 0.106692420 0.107293549 0.107760510 0.108965638 0.110171371 0.111686896 0.112278286 0.113077675 0.114715711 0.116073171 0.118798843 0.120548254 0.121229264 0.122133276 0.123802582 0.125184531 0.126204652 0.126804092 0.131530589 0.134752119 0.135473507 0.142342294 0.143402259 0.146783043 0.147118372 0.149570792 0.151789384 0.154408551 0.155558251 0.156559001 0.160826015 0.161642178 0.173207089 0.173709649 0.178807315 0.183893398 0.184898291 0.188873062 0.189932644 0.193772832 0.193835546 0.198220976 0.199761375 0.204877075 0.206753008 0.206995365 0.209673103 0.211082986 0.215162799 0.217132523 0.217543220 0.220310730 0.224809451 0.226186224 0.231736396 0.234700125 0.235325118 0.235595381 0.244441837 0.255660582 0.256952278 0.262651662 0.269477602 0.279641549 0.282819968 0.286130988 0.291259335 0.295745775 0.304152712 0.305464273 0.307059047 0.313154539 0.316205737 0.316543478 0.321851241 0.329100953 0.332091825 0.349903874 0.351640899 0.354474118 0.355309715 0.359799538 0.362479210 0.362836713 0.383279624 0.385596113 0.391534329 0.410278664 0.425192978 0.429621178 0.453150349 0.468467997 0.473949915 0.479748504 0.482394308 0.486768590 0.490009188 0.508424819 0.514538441 0.534857117 0.565970438 0.572594749 0.591714015 0.593254380 0.606181369 0.607354183 0.643632668 0.645926978 0.647881846 0.674135370 0.677206738 0.684590174 0.691327383 0.692763930 0.699203922 0.703996224 0.716828767 0.741156640 0.751151462 0.758222084 0.764922505 0.772224883 0.778676794 0.810396114 0.812520839 0.815580794 0.821529090 0.821724033 0.827853382 0.831211958 0.835315593 0.836377980 0.845068867 0.845651840 0.848043970 0.857834958 0.864456049 0.865172223 0.873055208 0.880850342 0.884213035 0.889228872 0.891771946 0.900463896 0.903698843 0.920314440 0.923301194 0.932700592 0.935006818 0.964690723 0.975611414 0.985592525 1.000900877 1.017072707 1.026886446 1.041190893 1.049908690 1.057146681 1.067659938 1.086456296 1.088408467 1.103284378 1.105996220 1.112172589 1.119367742 1.123391418 1.135189616 1.142403285 1.171042775 1.173901326 1.180783147 1.186045853 1.188891890 1.195190788 1.223535924 1.226865249 1.274131839 1.300725510 1.318831222 1.327708233 1.332438356 1.333830686 1.335527408 1.339910744 1.342558259 1.344857780 1.358370707 1.376288951 1.382797534 1.383857158 1.408569412 1.419460353 1.433066388 1.551371558 1.665421028 1.774542756</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">158</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34684023" y3="0.02475199" z3="-0.18903555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39541356" y3="0.14609021" z3="0.41086083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65176455" y3="0.42028868" z3="-0.3436365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72134185" y3="1.21714193" z3="-2.25044186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38977434" y3="0.40820598" z3="-1.17626974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71412306" y3="0.83064306" z3="-3.64153308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61902124" y3="1.73187472" z3="-3.11196312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35379684" y3="2.57990903" z3="-4.56853853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54086568" y3="1.23666784" z3="-4.34409457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47112995" y3="2.91669426" z3="-5.1210359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91756005" y3="-0.50090364" z3="-3.43427192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10210016" y3="0.01141352" z3="-0.99157724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40872133" y3="-1.13035172" z3="-1.99544517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93718413" y3="-1.01357701" z3="-1.81047277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.12215066" y3="-2.4503446" z3="-1.85624592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1281348" y3="-3.59207262" z3="0.64852651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00669168" y3="-5.29376284" z3="-4.74723904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22412522" y3="-5.02295729" z3="-3.71351622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.82730144" y3="-4.2979068" z3="-1.10428289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.80141426" y3="-4.62469609" z3="-2.85811227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54425584" y3="-5.08526924" z3="-3.26359754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84665087" y3="-4.71666066" z3="-1.95512331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.51156369" y3="-4.27748963" z3="-1.53707267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83615274" y3="-4.56288387" z3="-3.19786906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34534953" y3="-5.39043817" z3="-3.94111482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88757749" y3="-4.72892096" z3="-1.61947483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01730652" y3="-3.83711339" z3="0.21210123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1569969" y3="-3.63135647" z3="0.85998938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04270912" y3="-4.09991551" z3="0.42834298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14994917" y3="-3.49576443" z3="2.32691576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20511885" y3="-3.31588149" z3="5.12511097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3437722" y3="-3.70958593" z3="3.03172032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98364002" y3="-3.19650025" z3="3.04715717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00897745" y3="-3.10717911" z3="4.43598545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37036991" y3="-3.62203847" z3="4.420781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25875231" y3="-3.95391459" z3="2.48413269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02667672" y3="-3.05269622" z3="2.54079992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0819959" y3="-2.89386918" z3="4.97463703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30657029" y3="-3.80031909" z3="4.9569653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2239397" y3="-3.25406112" z3="6.21673212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43339752" y3="-3.92242348" z3="-0.63057862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19478466" y3="-3.4238252" z3="-1.08271522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50326034" y3="0.23137687" z3="-4.69119478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08191258" y3="-1.70910396" z3="0.00603006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89125534" y3="-0.95788111" z3="1.1644783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82122806" y3="-0.31361738" z3="1.4831166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36268128" y3="0.58621247" z3="1.19114304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42709401" y3="1.44800883" z3="-0.45587851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00438898" y3="-0.64572223" z3="1.41992895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.39687422" y3="1.81527446" z3="2.60517789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85545078" y3="-0.9436518" z3="2.07416679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6087946" y3="-0.33181518" z3="3.33053306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18888837" y3="0.73753044" z3="-1.26573558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3541426" y3="2.23257214" z3="-0.46608971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40292345" y3="1.93475579" z3="-0.63253986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01777593" y3="-0.99466257" z3="2.46592984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97642884" y3="-0.17730754" z3="1.19142215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89989628" y3="-1.49901672" z3="0.73001978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.45802714" y3="1.30154876" z3="3.58119613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.52596704" y3="2.42355952" z3="2.60200365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.25304075" y3="2.50856438" z3="2.52208061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74222302" y3="-0.7912209" z3="3.83212246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51691521" y3="-0.50256966" z3="3.92446882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43642899" y3="0.7495213" z3="3.20864073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85122845" y3="-0.73047704" z3="0.99611118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40753298" y3="-2.05173567" z3="0.85828135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75329583" y3="-2.69064204" z3="1.90415552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5591244" y3="-1.99551044" z3="3.09367861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0575505" y3="-0.71075871" z3="3.288887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71179619" y3="-0.08534298" z3="2.23223695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5031092" y3="-2.55038204" z3="-0.10675467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34547438" y3="-3.6943496" z3="1.78311251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69768011" y3="-2.58594849" z3="4.12290339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89001931" y3="-0.2002039" z3="4.23890637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0703418" y3="0.94167404" z3="2.34802091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81824499" y3="0.45411187" z3="-4.28076355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79804563" y3="-0.51149648" z3="-4.46903558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44553838" y3="-1.70442894" z3="-5.08875897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1545746" y3="-1.93758756" z3="-5.553105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8176387" y3="-0.96851685" z3="-5.34487607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.067773" y3="1.37836512" z3="-3.75330143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.82048546" y3="-0.36308248" z3="-4.12048328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45686303" y3="-2.75243407" z3="-5.23686912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07916822" y3="-2.87898688" z3="-6.05026157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84188602" y3="-1.15666064" z3="-5.66990606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37603632" y3="-1.88620951" z3="5.06456341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31519986" y3="-3.72561865" z3="3.96060144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23053421" y3="-3.65067092" z3="-6.0188402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.46155231" y3="-2.67029219" z3="-4.55824016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06858389" y3="1.14705121" z3="-1.49207856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10188772" y3="1.53901127" z3="-2.46351544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43562636" y3="1.48015185" z3="-1.69586869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8380081" y3="2.15267272" z3="-2.8237644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1669241" y3="1.17985233" z3="-0.93903601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89331884" y3="2.39775447" z3="-2.97264292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55383151" y3="2.21671312" z3="-3.62975972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88410289" y3="2.51466437" z3="-3.80499568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82746058" y3="2.49229618" z3="-4.39788972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20938918" y3="3.02924638" z3="-4.71350048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38071651" y3="3.13636731" z3="-3.2925421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2577999" y3="3.55192483" z3="-4.06709881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18803482" y3="4.1442998" z3="-2.69329086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92785436" y3="5.47856301" z3="-2.89815061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02328791" y3="3.85214644" z3="-2.05495828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56447132" y3="6.23182616" z3="-2.42543684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02344332" y3="4.93921903" z3="-4.27358988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84238777" y3="5.88590951" z3="-3.70950125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16554925" y3="5.23979504" z3="-4.88307724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65032937" y3="6.9503577" z3="-3.87131845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48345229" y3="-2.18807843" z3="-0.2953103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46348061" y3="-2.984808" z3="-1.05909707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00211393" y3="-2.5655098" z3="0.60098177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10291491" y3="-1.37021598" z3="-0.71016743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18994458" y3="-1.41536983" z3="-1.17351864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32683803" y3="-0.37357043" z3="-1.51788894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1120041" y3="-1.54414072" z3="-0.97884383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44281079" y3="-2.06763601" z3="-2.02296252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3468,.0248,-.189;7.3954,.1461,.4109;6.6518,.4203,-.3436;4.7213,1.2171,-2.2504;4.3898,.4082,-1.1763;2.7141,.8306,-3.6415;3.619,1.7319,-3.112;1.3538,2.5799,-4.5685;1.5409,1.2367,-4.3441;.4711,2.9167,-5.121;2.9176,-.5009,-3.4343;3.1021,.0114,-.9916;2.4087,-1.1304,-1.9954;.9372,-1.0136,-1.8105;3.1222,-2.4503,-1.8562;-.1281,-3.5921,.6485;.0067,-5.2938,-4.7472;-.2241,-5.023,-3.7135;-.8273,-4.2979,-1.1043;.8014,-4.6247,-2.8581;-1.5443,-5.0853,-3.2636;-1.8467,-4.7167,-1.9551;.5116,-4.2775,-1.5371;1.8362,-4.5629,-3.1979;-2.3453,-5.3904,-3.9411;-2.8876,-4.7289,-1.6195;-1.0173,-3.8371,.2121;-2.157,-3.6314,.86;-3.0427,-4.0999,.4283;-2.1499,-3.4958,2.3269;-2.2051,-3.3159,5.1251;-3.3438,-3.7096,3.0317;-.9836,-3.1965,3.0472;-1.009,-3.1072,4.436;-3.3704,-3.622,4.4208;-4.2588,-3.9539,2.4841;-.0267,-3.0527,2.5408;-.082,-2.8939,4.9746;-4.3066,-3.8003,4.957;-2.2239,-3.2541,6.2167;1.4334,-3.9224,-.6306;2.1948,-3.4238,-1.0827;.5033,.2314,-4.6912;-3.0819,-1.7091,.006;-2.8913,-.9579,1.1645;-1.8212,-.3136,1.4831;-.3627,.5862,1.1911;-.4271,1.448,-.4559;1.0044,-.6457,1.4199;-.3969,1.8153,2.6052;-3.8555,-.9437,2.0742;-3.6088,-.3318,3.3305;-.1889,.7375,-1.2657;.3541,2.2326,-.4661;-1.4029,1.9348,-.6325;1.0178,-.9947,2.4659;1.9764,-.1773,1.1914;.8999,-1.499,.73;-.458,1.3015,3.5812;.526,2.4236,2.602;-1.253,2.5086,2.5221;-2.7422,-.7912,3.8321;-4.5169,-.5026,3.9245;-3.4364,.7495,3.2086;4.8512,-.7305,.9961;4.4075,-2.0517,.8583;3.7533,-2.6906,1.9042;3.5591,-1.9955,3.0937;4.0576,-.7108,3.2889;4.7118,-.0853,2.2322;4.5031,-2.5504,-.1068;3.3455,-3.6943,1.7831;2.6977,-2.5859,4.1229;3.89,-.2002,4.2389;5.0703,.9417,2.348;-.8182,.4541,-4.2808;-1.798,-.5115,-4.469;-1.4455,-1.7044,-5.0888;-.1546,-1.9376,-5.5531;.8176,-.9685,-5.3449;-1.0678,1.3784,-3.7533;-2.8205,-.3631,-4.1205;-2.4569,-2.7524,-5.2369;.0792,-2.879,-6.0503;1.8419,-1.1567,-5.6699;2.376,-1.8862,5.0646;2.3152,-3.7256,3.9606;-2.2305,-3.6507,-6.0188;-3.4616,-2.6703,-4.5582;7.0686,1.1471,-1.4921;6.1019,1.539,-2.4635;8.4356,1.4802,-1.6959;8.838,2.1527,-2.8238;9.1669,1.1799,-.939;9.8933,2.3978,-2.9726;6.5538,2.2167,-3.6298;7.8841,2.5147,-3.805;5.8275,2.4923,-4.3979;8.2094,3.0292,-4.7135;3.3807,3.1364,-3.2925;2.2578,3.5519,-4.0671;4.188,4.1443,-2.6933;3.9279,5.4786,-2.8982;5.0233,3.8521,-2.055;4.5645,6.2318,-2.4254;2.0234,4.9392,-4.2736;2.8424,5.8859,-3.7095;1.1655,5.2398,-4.8831;2.6503,6.9504,-3.8713;-4.4835,-2.1881,-.2953;-4.4635,-2.9848,-1.0591;-5.0021,-2.5655,.601;-5.1029,-1.3702,-.7102;-2.1899,-1.4154,-1.1735;-2.3268,-.3736,-1.5179;-1.112,-1.5441,-.9788;-2.4428,-2.0676,-2.023;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650385568575</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002548990825 0.000370269095 0.020685587774 0.005337719514</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030505701 -0.000724664 0.000050864 0.000262483 0.000289426 0.000358502 0.000397561 0.000470526 0.000602396 0.000782306 0.000915063 0.001105929 0.001248148 0.001259236 0.001374564 0.001389605 0.001654495 0.001715596 0.001794461 0.001968576 0.002143387 0.002463373 0.002600742 0.002678883 0.002811028 0.003094462 0.003249024 0.003414649 0.003813438 0.003931881 0.004329412 0.004713717 0.004811284 0.004967932 0.005818282 0.005965740 0.006184913 0.006530287 0.006774449 0.007485252 0.007877435 0.008099254 0.009091374 0.009387670 0.009817974 0.010676016 0.011078662 0.011434556 0.011717204 0.011972758 0.012816122 0.013038993 0.013855874 0.014260027 0.014903238 0.015274334 0.015570897 0.015587050 0.015939065 0.016787570 0.017267329 0.017430271 0.018769754 0.019273605 0.019571257 0.020491401 0.021147995 0.021298825 0.022304526 0.023069733 0.024863646 0.025864925 0.026525159 0.026807957 0.027128724 0.028843838 0.029322369 0.031397047 0.032902581 0.033250217 0.033646827 0.035273136 0.035526682 0.036998532 0.038547763 0.039359188 0.040434698 0.040887079 0.041777059 0.044319115 0.045141551 0.046208668 0.047109238 0.049121770 0.050233935 0.050668850 0.050973743 0.051169026 0.052465408 0.052495195 0.052826210 0.052881697 0.054235272 0.054637515 0.055321694 0.055965332 0.056425086 0.056493031 0.056936418 0.058230809 0.060214341 0.060516763 0.061370964 0.061799051 0.062857342 0.063807110 0.064953569 0.065493990 0.066263190 0.067555658 0.068655502 0.070027649 0.072526803 0.074177360 0.074290278 0.076065441 0.077491965 0.083259203 0.084669340 0.086645512 0.086962985 0.087539896 0.090254730 0.090682535 0.092922060 0.094572575 0.095169088 0.096291007 0.096946389 0.097679547 0.098689573 0.099455857 0.100135549 0.102273224 0.102581359 0.102947368 0.103323096 0.103893922 0.104427062 0.106693352 0.107294149 0.107803301 0.108965847 0.110172238 0.111687263 0.112287583 0.113077912 0.114718615 0.116080105 0.118801158 0.120548457 0.121229985 0.122143522 0.123802553 0.125192067 0.126204843 0.126804496 0.131577052 0.134758067 0.135489334 0.142359351 0.143402774 0.146783905 0.147123849 0.149571401 0.151801137 0.154412033 0.155562846 0.156564444 0.160826616 0.161643152 0.173213393 0.173709814 0.178824498 0.183893552 0.184898305 0.188876432 0.189950268 0.193776238 0.193840366 0.198226764 0.199842934 0.204879994 0.206756631 0.207020378 0.209674245 0.211086211 0.215163589 0.217157295 0.217546197 0.220314114 0.224821512 0.226186360 0.231736322 0.234700131 0.235325960 0.235600839 0.244441881 0.255660979 0.256969818 0.262656041 0.269479478 0.279661795 0.282832268 0.286131217 0.291261906 0.295745837 0.304152804 0.305467184 0.307060104 0.313158773 0.316206033 0.316568137 0.321855123 0.329103185 0.332106856 0.349935372 0.351668024 0.354478799 0.355317468 0.359804953 0.362559463 0.362912897 0.383279491 0.385630515 0.391535829 0.410278814 0.425202872 0.429669433 0.453192317 0.468473506 0.474001678 0.480527390 0.482419536 0.486774500 0.490060351 0.508436245 0.514606738 0.534868083 0.565999835 0.572594654 0.591725973 0.593311236 0.606192676 0.607364581 0.643665924 0.645946435 0.647884499 0.674136246 0.677229143 0.684604435 0.691330570 0.692849880 0.699207598 0.704017076 0.716829085 0.741160460 0.751153141 0.758232236 0.764922737 0.772225102 0.778676817 0.810396253 0.812525262 0.815707320 0.821536755 0.821733440 0.827875233 0.831223952 0.835339035 0.836378106 0.845076779 0.845654212 0.848050423 0.857851799 0.864465239 0.865218977 0.873065135 0.880850817 0.884230102 0.889246205 0.891779743 0.900471841 0.903708425 0.920323413 0.923301376 0.932812521 0.935012438 0.964713371 0.975616516 0.985594914 1.000902741 1.017129144 1.026946616 1.041197494 1.049948380 1.057172216 1.067673628 1.086489711 1.088409148 1.103285317 1.106012464 1.112183988 1.119370120 1.123398012 1.135190168 1.142433397 1.171113915 1.173902815 1.180783182 1.186086323 1.189116114 1.195404332 1.223536556 1.226949171 1.274183225 1.300738704 1.318831902 1.327724441 1.332475605 1.333863796 1.335560774 1.339914595 1.342564566 1.344860035 1.358406403 1.376369940 1.382798480 1.383861279 1.408570368 1.419461124 1.433075815 1.551371708 1.665917534 1.774545788</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">159</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34624018" y3="0.02870484" z3="-0.19067885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39458821" y3="0.15092703" z3="0.41118999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6513521" y3="0.42433634" z3="-0.34421215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72252824" y3="1.22017774" z3="-2.25307052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38971317" y3="0.41186209" z3="-1.17870749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71723517" y3="0.83283771" z3="-3.64624451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62165482" y3="1.73446614" z3="-3.11664987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35862423" y3="2.58116688" z3="-4.57767297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54489894" y3="1.23836251" z3="-4.35062959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47609322" y3="2.91889894" z3="-5.12978891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.91926987" y3="-0.49816351" z3="-3.43621051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1017729" y3="0.01656029" z3="-0.99425773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40703702" y3="-1.12491441" z3="-1.99749454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93556186" y3="-1.00466914" z3="-1.81494464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11753753" y3="-2.44619149" z3="-1.85563777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13107126" y3="-3.59712466" z3="0.65474635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00003191" y3="-5.28643704" z3="-4.74573746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23048901" y3="-5.01708119" z3="-3.71132533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8308708" y3="-4.29977417" z3="-1.09950415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79572073" y3="-4.61723741" z3="-2.85697187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54981366" y3="-5.08465898" z3="-3.25931204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85106119" y3="-4.71976145" z3="-1.94951691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50765079" y3="-4.2743062" z3="-1.53451115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8331574" y3="-4.55788048" z3="-3.19910934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34894937" y3="-5.39404759" z3="-3.93573468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88909322" y3="-4.74123555" z3="-1.61201252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02000464" y3="-3.84207935" z3="0.21816635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15974863" y3="-3.63440712" z3="0.86526999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04595446" y3="-4.1013817" z3="0.43297335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15404154" y3="-3.49716815" z3="2.33185391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21103037" y3="-3.3135435" z3="5.12968718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34867672" y3="-3.7078112" z3="3.03608835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98769908" y3="-3.199844" z3="3.05254083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01328967" y3="-3.10950316" z3="4.44132417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37664654" y3="-3.61765538" z3="4.42484171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26177466" y3="-3.95387245" z3="2.4886357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02906596" y3="-3.06082483" z3="2.54695581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08355574" y3="-2.90157666" z3="4.98041249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31336606" y3="-3.79371531" z3="4.96059159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23000383" y3="-3.25121536" z3="6.22135402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43059252" y3="-3.91885343" z3="-0.62871187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19105758" y3="-3.41892107" z3="-1.08150291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.507367" y3="0.23300452" z3="-4.69521907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08089157" y3="-1.71065943" z3="0.0090536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8935615" y3="-0.95913061" z3="1.16789034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8262565" y3="-0.31315878" z3="1.49014707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36327052" y3="0.58083827" z3="1.19741929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42911223" y3="1.45037488" z3="-0.44563324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00087086" y3="-0.65610038" z3="1.4165032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38879974" y3="1.80153345" z3="2.61850164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8603956" y3="-0.94549897" z3="2.07442864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61853458" y3="-0.33273765" z3="3.33080467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19244492" y3="0.74383901" z3="-1.25962563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3486459" y3="2.23556815" z3="-0.45209702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40537146" y3="1.93712568" z3="-0.61813886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01738259" y3="-1.00853826" z3="2.46158529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97382643" y3="-0.18950428" z3="1.18554962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89137896" y3="-1.50715272" z3="0.72454434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4490009" y3="1.28121878" z3="3.59058006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.53732425" y3="2.40491201" z3="2.61711244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.24190136" y3="2.49903905" z3="2.5427662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75411674" y3="-0.79345681" z3="3.83555058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52906484" y3="-0.50300702" z3="3.91992414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44355932" y3="0.74923362" z3="3.20957977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85125753" y3="-0.72754975" z3="0.99432122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41095817" y3="-2.049895" z3="0.85546898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7567371" y3="-2.69086286" z3="1.90008654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56092445" y3="-1.99688655" z3="3.09093008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05532893" y3="-0.71088873" z3="3.28661825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70881094" y3="-0.08331762" z3="2.23065662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50517351" y3="-2.54699887" z3="-0.11245397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3480969" y3="-3.69514294" z3="1.77556671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69696015" y3="-2.5892003" z3="4.1169151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88211955" y3="-0.20026102" z3="4.23369068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06256068" y3="0.94461348" z3="2.3459294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81318073" y3="0.45516862" z3="-4.28258863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79250167" y3="-0.51180795" z3="-4.46867963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44057855" y3="-1.70470259" z3="-5.08944631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15068292" y3="-1.93734345" z3="-5.5561059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82131623" y3="-0.96687026" z3="-5.34786756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06220146" y3="1.37938384" z3="-3.75456094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81401238" y3="-0.36395964" z3="-4.11738973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45172615" y3="-2.75370341" z3="-5.23682321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08286147" y3="-2.87860927" z3="-6.05418514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84545924" y3="-1.15410801" z3="-5.6748969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37110789" y3="-1.89045305" z3="5.05618435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31411514" y3="-3.72920644" z3="3.95181699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22588405" y3="-3.65232712" z3="-6.01869904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45563753" y3="-2.67117001" z3="-4.55729594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0692548" y3="1.15116831" z3="-1.49220393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10353444" y3="1.54267617" z3="-2.4647312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43645084" y3="1.48410943" z3="-1.69464312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83991247" y3="2.15648831" z3="-2.82209654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16673663" y3="1.18319399" z3="-0.93718429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89532155" y3="2.40148229" z3="-2.96985429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55688392" y3="2.22078196" z3="-3.63053696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88715038" y3="2.51870213" z3="-3.80430494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83137683" y3="2.49548745" z3="-4.39978483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21335597" y3="3.03391149" z3="-4.71231492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3840611" y3="3.13893832" z3="-3.29974399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26234728" y3="3.55397772" z3="-4.07646847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19039764" y3="4.14775914" z3="-2.70058083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93135796" y3="5.48154802" z3="-2.90863667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02432734" y3="3.85639887" z3="-2.0600334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56670925" y3="6.23575322" z3="-2.43518843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02886162" y3="4.94119702" z3="-4.28588967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84770883" y3="5.88806784" z3="-3.72290845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17232548" y3="5.24101409" z3="-4.89766209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65699619" y3="6.9519678" z3="-3.88790968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48133991" y3="-2.18974513" z3="-0.29655287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45768408" y3="-2.98548321" z3="-1.06010088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00310919" y3="-2.56821005" z3="0.59692319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09903697" y3="-1.37182107" z3="-0.71339229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18569884" y3="-1.41714273" z3="-1.16828302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32135372" y3="-0.37566011" z3="-1.51341629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10795649" y3="-1.54651452" z3="-0.97123535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43617279" y3="-2.06946842" z3="-2.0182056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3462,.0287,-.1907;7.3946,.1509,.4112;6.6514,.4243,-.3442;4.7225,1.2202,-2.2531;4.3897,.4119,-1.1787;2.7172,.8328,-3.6462;3.6217,1.7345,-3.1166;1.3586,2.5812,-4.5777;1.5449,1.2384,-4.3506;.4761,2.9189,-5.1298;2.9193,-.4982,-3.4362;3.1018,.0166,-.9943;2.407,-1.1249,-1.9975;.9356,-1.0047,-1.8149;3.1175,-2.4462,-1.8556;-.1311,-3.5971,.6547;0,-5.2864,-4.7457;-.2305,-5.0171,-3.7113;-.8309,-4.2998,-1.0995;.7957,-4.6172,-2.857;-1.5498,-5.0847,-3.2593;-1.8511,-4.7198,-1.9495;.5077,-4.2743,-1.5345;1.8332,-4.5579,-3.1991;-2.3489,-5.394,-3.9357;-2.8891,-4.7412,-1.612;-1.02,-3.8421,.2182;-2.1597,-3.6344,.8653;-3.046,-4.1014,.433;-2.154,-3.4972,2.3319;-2.211,-3.3135,5.1297;-3.3487,-3.7078,3.0361;-.9877,-3.1998,3.0525;-1.0133,-3.1095,4.4413;-3.3766,-3.6177,4.4248;-4.2618,-3.9539,2.4886;-.0291,-3.0608,2.547;-.0836,-2.9016,4.9804;-4.3134,-3.7937,4.9606;-2.23,-3.2512,6.2214;1.4306,-3.9189,-.6287;2.1911,-3.4189,-1.0815;.5074,.233,-4.6952;-3.0809,-1.7107,.0091;-2.8936,-.9591,1.1679;-1.8263,-.3132,1.4901;-.3633,.5808,1.1974;-.4291,1.4504,-.4456;1.0009,-.6561,1.4165;-.3888,1.8015,2.6185;-3.8604,-.9455,2.0744;-3.6185,-.3327,3.3308;-.1924,.7438,-1.2596;.3486,2.2356,-.4521;-1.4054,1.9371,-.6181;1.0174,-1.0085,2.4616;1.9738,-.1895,1.1855;.8914,-1.5072,.7245;-.449,1.2812,3.5906;.5373,2.4049,2.6171;-1.2419,2.499,2.5428;-2.7541,-.7935,3.8356;-4.5291,-.503,3.9199;-3.4436,.7492,3.2096;4.8513,-.7275,.9943;4.411,-2.0499,.8555;3.7567,-2.6909,1.9001;3.5609,-1.9969,3.0909;4.0553,-.7109,3.2866;4.7088,-.0833,2.2307;4.5052,-2.547,-.1125;3.3481,-3.6951,1.7756;2.697,-2.5892,4.1169;3.8821,-.2003,4.2337;5.0626,.9446,2.3459;-.8132,.4552,-4.2826;-1.7925,-.5118,-4.4687;-1.4406,-1.7047,-5.0894;-.1507,-1.9373,-5.5561;.8213,-.9669,-5.3479;-1.0622,1.3794,-3.7546;-2.814,-.364,-4.1174;-2.4517,-2.7537,-5.2368;.0829,-2.8786,-6.0542;1.8455,-1.1541,-5.6749;2.3711,-1.8905,5.0562;2.3141,-3.7292,3.9518;-2.2259,-3.6523,-6.0187;-3.4556,-2.6712,-4.5573;7.0693,1.1512,-1.4922;6.1035,1.5427,-2.4647;8.4365,1.4841,-1.6946;8.8399,2.1565,-2.8221;9.1667,1.1832,-.9372;9.8953,2.4015,-2.9699;6.5569,2.2208,-3.6305;7.8872,2.5187,-3.8043;5.8314,2.4955,-4.3998;8.2134,3.0339,-4.7123;3.3841,3.1389,-3.2997;2.2623,3.554,-4.0765;4.1904,4.1478,-2.7006;3.9314,5.4815,-2.9086;5.0243,3.8564,-2.06;4.5667,6.2358,-2.4352;2.0289,4.9412,-4.2859;2.8477,5.8881,-3.7229;1.1723,5.241,-4.8977;2.657,6.952,-3.8879;-4.4813,-2.1897,-.2966;-4.4577,-2.9855,-1.0601;-5.0031,-2.5682,.5969;-5.099,-1.3718,-.7134;-2.1857,-1.4171,-1.1683;-2.3214,-.3757,-1.5134;-1.108,-1.5465,-.9712;-2.4362,-2.0695,-2.0182;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650399548476</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002393889590 0.000338406800 0.018091485063 0.005336165703</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030506481 -0.000640573 0.000050017 0.000263913 0.000290335 0.000358571 0.000397527 0.000470869 0.000603649 0.000784720 0.000914730 0.001106436 0.001248068 0.001259639 0.001375905 0.001389732 0.001654620 0.001717925 0.001798526 0.001969499 0.002146671 0.002463846 0.002600838 0.002682565 0.002810934 0.003096024 0.003253470 0.003415470 0.003829075 0.003931893 0.004331312 0.004724690 0.004814893 0.004968623 0.005818322 0.005967970 0.006186621 0.006535742 0.006774948 0.007486474 0.007878081 0.008099208 0.009091616 0.009393073 0.009819990 0.010682146 0.011077915 0.011442480 0.011717259 0.011977876 0.012816091 0.013040816 0.013856226 0.014264396 0.014904310 0.015281379 0.015586153 0.015616969 0.015950610 0.016794953 0.017267937 0.017439502 0.018782909 0.019274181 0.019577085 0.020497620 0.021147869 0.021298803 0.022304531 0.023069736 0.024865735 0.025866080 0.026534214 0.026808388 0.027130625 0.028853983 0.029322377 0.031396920 0.032929030 0.033263351 0.033648085 0.035300183 0.035530868 0.037132359 0.038617983 0.039430408 0.040476127 0.040953109 0.041807603 0.044322852 0.045155712 0.046208821 0.047113210 0.049128570 0.050238980 0.050669056 0.050975713 0.051169440 0.052467872 0.052497696 0.052826475 0.052885013 0.054243752 0.054641838 0.055351294 0.055966043 0.056425648 0.056492966 0.056938075 0.058230860 0.060225261 0.060525895 0.061387210 0.061801323 0.062860247 0.063891418 0.064960874 0.065501892 0.066264259 0.067558244 0.068656808 0.070028817 0.072526930 0.074186339 0.074293052 0.076065701 0.077496726 0.083261840 0.084677164 0.086664621 0.086967914 0.087542454 0.090254411 0.090686376 0.092922468 0.094572619 0.095172153 0.096291435 0.096949800 0.097681510 0.098690895 0.099458629 0.100141582 0.102276521 0.102582634 0.102958062 0.103324711 0.103893618 0.104478014 0.106695385 0.107294484 0.107849372 0.108965831 0.110172479 0.111690463 0.112290342 0.113078160 0.114725787 0.116087935 0.118801476 0.120548817 0.121230324 0.122150348 0.123802679 0.125194218 0.126206170 0.126804836 0.131613810 0.134772052 0.135495040 0.142375100 0.143404101 0.146784467 0.147126831 0.149572444 0.151805954 0.154417671 0.155564079 0.156564921 0.160827301 0.161643954 0.173213187 0.173710075 0.178825870 0.183894070 0.184900617 0.188881129 0.189958016 0.193780768 0.193842411 0.198228044 0.199922257 0.204882556 0.206758686 0.207040379 0.209677694 0.211104519 0.215167431 0.217157787 0.217546465 0.220319582 0.224826162 0.226186910 0.231738259 0.234701999 0.235325920 0.235601877 0.244441879 0.255662715 0.256977609 0.262664087 0.269479341 0.279673660 0.282844051 0.286132619 0.291261986 0.295747657 0.304152836 0.305469310 0.307060578 0.313163223 0.316206266 0.316591249 0.321860690 0.329109692 0.332116080 0.349960373 0.351690570 0.354478642 0.355325965 0.359808859 0.362594505 0.362989845 0.383282438 0.385652002 0.391535957 0.410283433 0.425209611 0.429690787 0.453332277 0.468474103 0.474044291 0.481008567 0.482457777 0.486775128 0.490079977 0.508441421 0.514621039 0.534870110 0.566013245 0.572601194 0.591734301 0.593351279 0.606201460 0.607367715 0.643721248 0.645975807 0.647893657 0.674137504 0.677246661 0.684636245 0.691333308 0.692902952 0.699208058 0.704040424 0.716829089 0.741164895 0.751153616 0.758234737 0.764927426 0.772225336 0.778679752 0.810397812 0.812530617 0.815835083 0.821544702 0.821744792 0.827890850 0.831235819 0.835369555 0.836385886 0.845083007 0.845654895 0.848052539 0.857879629 0.864473462 0.865246213 0.873072695 0.880854971 0.884240297 0.889251882 0.891783755 0.900474343 0.903709277 0.920326105 0.923301546 0.932904394 0.935012477 0.964718460 0.975618895 0.985596496 1.000903305 1.017190953 1.026972719 1.041208413 1.049949344 1.057181102 1.067682899 1.086503692 1.088409293 1.103295441 1.106045472 1.112190570 1.119380578 1.123399504 1.135195797 1.142460576 1.171253413 1.173902902 1.180783498 1.186105321 1.189341691 1.195563936 1.223536534 1.226982583 1.274192092 1.300740203 1.318832643 1.327726145 1.332476281 1.333897112 1.335594212 1.339949813 1.342576885 1.344859928 1.358423592 1.376423031 1.382798830 1.383861487 1.408575944 1.419465579 1.433085379 1.551372049 1.666344852 1.774546502</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">160</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34540646" y3="0.03245233" z3="-0.19200365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39297512" y3="0.15101575" z3="0.41048712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65067784" y3="0.42638398" z3="-0.34483621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72392168" y3="1.2251712" z3="-2.25454554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38990543" y3="0.41735304" z3="-1.18012911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72056562" y3="0.83578895" z3="-3.65039059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62395376" y3="1.73838406" z3="-3.12009291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36467838" y3="2.58208745" z3="-4.58871053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54959054" y3="1.24012224" z3="-4.35786425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48343404" y3="2.91788073" z3="-5.14418511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92216048" y3="-0.49516042" z3="-3.43831716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10148197" y3="0.02238377" z3="-0.99631958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40634287" y3="-1.11891997" z3="-1.99963627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93481828" y3="-0.99569925" z3="-1.81983097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11440293" y3="-2.44131739" z3="-1.85526508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13432173" y3="-3.60289977" z3="0.66014413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00505033" y3="-5.27998782" z3="-4.74434066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23410858" y3="-5.01498168" z3="-3.70866124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83387677" y3="-4.30386031" z3="-1.09481027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79143539" y3="-4.61161316" z3="-2.85562981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55230293" y3="-5.08922154" z3="-3.25425711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8527321" y3="-4.72825595" z3="-1.94318501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50311623" y3="-4.2706542" z3="-1.53248362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82485682" y3="-4.54083249" z3="-3.19928848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35335778" y3="-5.39784703" z3="-3.93029642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89141752" y3="-4.75241388" z3="-1.60338588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02329328" y3="-3.84739428" z3="0.22325665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16314631" y3="-3.63694667" z3="0.86959138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04990891" y3="-4.10271471" z3="0.43731239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15704672" y3="-3.50029687" z3="2.33649163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21407957" y3="-3.31544852" z3="5.13438456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35231905" y3="-3.70828899" z3="3.04038401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99032202" y3="-3.20475708" z3="3.05751747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01653146" y3="-3.11279173" z3="4.44615135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37978715" y3="-3.61826362" z3="4.42932478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26849291" y3="-3.94864135" z3="2.49213867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03261177" y3="-3.0656936" z3="2.55197775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08982392" y3="-2.90082243" z3="4.98471568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3175504" y3="-3.79110133" z3="4.96480183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23411056" y3="-3.25109036" z3="6.22583512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4237985" y3="-3.90950361" z3="-0.62824478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18539666" y3="-3.41077023" z3="-1.08185266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51177685" y3="0.23430807" z3="-4.70125526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07930731" y3="-1.71297146" z3="0.01235515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89601575" y3="-0.96096499" z3="1.17159684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82963959" y3="-0.31387443" z3="1.49665747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36388865" y3="0.57482286" z3="1.20329126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43248487" y3="1.45203485" z3="-0.43544127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99695047" y3="-0.66744579" z3="1.41170831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37889785" y3="1.78869299" z3="2.63069333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86545279" y3="-0.94773203" z3="2.07545357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62778322" y3="-0.3334907" z3="3.3320176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19547195" y3="0.74936145" z3="-1.25215206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34900582" y3="2.23631624" z3="-0.44009135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40837701" y3="1.93995108" z3="-0.60586874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01648072" y3="-1.02309037" z3="2.45545729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96978616" y3="-0.20193225" z3="1.17916888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88348096" y3="-1.51578371" z3="0.71731928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43970141" y3="1.26388028" z3="3.60077051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55026036" y3="2.3872995" z3="2.62963572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22847385" y3="2.49140934" z3="2.56085768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76448055" y3="-0.79191612" z3="3.84007431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53994441" y3="-0.50378308" z3="3.91970119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45468793" y3="0.74805266" z3="3.20965647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84877764" y3="-0.72514174" z3="0.99133814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41152187" y3="-2.04843457" z3="0.85139674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7574955" y3="-2.69113797" z3="1.89511824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55726446" y3="-1.99772623" z3="3.08479962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04840955" y3="-0.71049513" z3="3.28168337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70249065" y3="-0.08127196" z3="2.22724966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51031196" y3="-2.54568127" z3="-0.11456659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35375101" y3="-3.69646115" z3="1.77182007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69518704" y3="-2.59238716" z3="4.11114285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8749007" y3="-0.20105234" z3="4.2307797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05528171" y3="0.94742654" z3="2.34422572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8082651" y3="0.45591292" z3="-4.2857249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78757967" y3="-0.51104814" z3="-4.4693904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43603835" y3="-1.70403691" z3="-5.08986852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14642328" y3="-1.93601986" z3="-5.55832793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82532813" y3="-0.96581433" z3="-5.35492014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05623009" y3="1.38017321" z3="-3.75765689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80897762" y3="-0.36390523" z3="-4.11686332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44707443" y3="-2.75325386" z3="-5.23457398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08651489" y3="-2.87748513" z3="-6.05574715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8489456" y3="-1.15288827" z3="-5.68303644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36848347" y3="-1.89493164" z3="5.05245795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31715399" y3="-3.73300842" z3="3.94690075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22148812" y3="-3.65309864" z3="-6.01508415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45087485" y3="-2.66998406" z3="-4.55507831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06967361" y3="1.15386459" z3="-1.49213358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10498416" y3="1.54616749" z3="-2.46536702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43715405" y3="1.48724057" z3="-1.69298811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.841822" y3="2.15976689" z3="-2.81997805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16685017" y3="1.18709639" z3="-0.93452921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89744677" y3="2.40564139" z3="-2.9663948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55953049" y3="2.22359479" z3="-3.63091519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8899804" y3="2.52135084" z3="-3.80336344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83510438" y3="2.49909366" z3="-4.40082695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21709652" y3="3.03565648" z3="-4.71125439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38673296" y3="3.14261417" z3="-3.30581245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26746752" y3="3.55596374" z3="-4.08676174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19180466" y3="4.15225553" z3="-2.70622393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93382632" y3="5.48571887" z3="-2.91731999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02431543" y3="3.86149565" z3="-2.06353464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56901458" y3="6.23992519" z3="-2.44467663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03502695" y3="4.94282224" z3="-4.29915814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85219486" y3="5.89108294" z3="-3.73482865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18020195" y3="5.24161938" z3="-4.91375415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66160626" y3="6.95516971" z3="-3.90139854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47928974" y3="-2.19097527" z3="-0.29750698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45465888" y3="-2.98555614" z3="-1.06279084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00281487" y3="-2.57063291" z3="0.59471988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0963789" y3="-1.37209088" z3="-0.71385931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18107486" y3="-1.41924218" z3="-1.16261286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3162883" y3="-0.37784417" z3="-1.50851597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10415654" y3="-1.54742284" z3="-0.96273349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42923668" y3="-2.07193587" z3="-2.0131519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3454,.0325,-.192;7.393,.151,.4105;6.6507,.4264,-.3448;4.7239,1.2252,-2.2545;4.3899,.4174,-1.1801;2.7206,.8358,-3.6504;3.624,1.7384,-3.1201;1.3647,2.5821,-4.5887;1.5496,1.2401,-4.3579;.4834,2.9179,-5.1442;2.9222,-.4952,-3.4383;3.1015,.0224,-.9963;2.4063,-1.1189,-1.9996;.9348,-.9957,-1.8198;3.1144,-2.4413,-1.8553;-.1343,-3.6029,.6601;-.0051,-5.28,-4.7443;-.2341,-5.015,-3.7087;-.8339,-4.3039,-1.0948;.7914,-4.6116,-2.8556;-1.5523,-5.0892,-3.2543;-1.8527,-4.7283,-1.9432;.5031,-4.2707,-1.5325;1.8249,-4.5408,-3.1993;-2.3534,-5.3978,-3.9303;-2.8914,-4.7524,-1.6034;-1.0233,-3.8474,.2233;-2.1631,-3.6369,.8696;-3.0499,-4.1027,.4373;-2.157,-3.5003,2.3365;-2.2141,-3.3154,5.1344;-3.3523,-3.7083,3.0404;-.9903,-3.2048,3.0575;-1.0165,-3.1128,4.4462;-3.3798,-3.6183,4.4293;-4.2685,-3.9486,2.4921;-.0326,-3.0657,2.552;-.0898,-2.9008,4.9847;-4.3176,-3.7911,4.9648;-2.2341,-3.2511,6.2258;1.4238,-3.9095,-.6282;2.1854,-3.4108,-1.0819;.5118,.2343,-4.7013;-3.0793,-1.713,.0124;-2.896,-.961,1.1716;-1.8296,-.3139,1.4967;-.3639,.5748,1.2033;-.4325,1.452,-.4354;.997,-.6674,1.4117;-.3789,1.7887,2.6307;-3.8655,-.9477,2.0755;-3.6278,-.3335,3.332;-.1955,.7494,-1.2522;.349,2.2363,-.4401;-1.4084,1.94,-.6059;1.0165,-1.0231,2.4555;1.9698,-.2019,1.1792;.8835,-1.5158,.7173;-.4397,1.2639,3.6008;.5503,2.3873,2.6296;-1.2285,2.4914,2.5609;-2.7645,-.7919,3.8401;-4.5399,-.5038,3.9197;-3.4547,.7481,3.2097;4.8488,-.7251,.9913;4.4115,-2.0484,.8514;3.7575,-2.6911,1.8951;3.5573,-1.9977,3.0848;4.0484,-.7105,3.2817;4.7025,-.0813,2.2272;4.5103,-2.5457,-.1146;3.3538,-3.6965,1.7718;2.6952,-2.5924,4.1111;3.8749,-.2011,4.2308;5.0553,.9474,2.3442;-.8083,.4559,-4.2857;-1.7876,-.511,-4.4694;-1.436,-1.704,-5.0899;-.1464,-1.936,-5.5583;.8253,-.9658,-5.3549;-1.0562,1.3802,-3.7577;-2.809,-.3639,-4.1169;-2.4471,-2.7533,-5.2346;.0865,-2.8775,-6.0557;1.8489,-1.1529,-5.683;2.3685,-1.8949,5.0525;2.3172,-3.733,3.9469;-2.2215,-3.6531,-6.0151;-3.4509,-2.67,-4.5551;7.0697,1.1539,-1.4921;6.105,1.5462,-2.4654;8.4372,1.4872,-1.693;8.8418,2.1598,-2.82;9.1669,1.1871,-.9345;9.8974,2.4056,-2.9664;6.5595,2.2236,-3.6309;7.89,2.5214,-3.8034;5.8351,2.4991,-4.4008;8.2171,3.0357,-4.7113;3.3867,3.1426,-3.3058;2.2675,3.556,-4.0868;4.1918,4.1523,-2.7062;3.9338,5.4857,-2.9173;5.0243,3.8615,-2.0635;4.569,6.2399,-2.4447;2.035,4.9428,-4.2992;2.8522,5.8911,-3.7348;1.1802,5.2416,-4.9138;2.6616,6.9552,-3.9014;-4.4793,-2.191,-.2975;-4.4547,-2.9856,-1.0628;-5.0028,-2.5706,.5947;-5.0964,-1.3721,-.7139;-2.1811,-1.4192,-1.1626;-2.3163,-.3778,-1.5085;-1.1042,-1.5474,-.9627;-2.4292,-2.0719,-2.0132;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650407212495</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002448457145 0.000340923800 0.019201872056 0.005337008507</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030506429 -0.000675439 0.000053706 0.000265827 0.000291708 0.000358552 0.000400176 0.000472601 0.000604915 0.000785720 0.000915240 0.001107717 0.001250225 0.001259979 0.001377046 0.001389751 0.001656463 0.001720824 0.001802881 0.001970375 0.002147493 0.002463798 0.002604289 0.002683560 0.002811635 0.003100474 0.003256872 0.003415415 0.003844920 0.003934052 0.004331699 0.004727103 0.004818143 0.004972190 0.005818371 0.005981525 0.006187801 0.006543698 0.006776327 0.007487603 0.007879970 0.008099188 0.009091574 0.009392834 0.009824828 0.010690378 0.011084060 0.011464275 0.011719899 0.011984383 0.012816341 0.013044624 0.013857778 0.014275907 0.014905749 0.015284940 0.015586515 0.015681870 0.015959122 0.016795906 0.017268121 0.017474659 0.018790810 0.019274808 0.019585259 0.020500670 0.021148379 0.021299155 0.022304562 0.023069777 0.024873841 0.025868947 0.026539284 0.026809717 0.027131129 0.028863976 0.029322410 0.031397694 0.032942458 0.033269493 0.033648000 0.035314922 0.035549590 0.037201188 0.038718083 0.039484481 0.040503010 0.041065809 0.041838645 0.044331748 0.045160743 0.046211529 0.047114817 0.049133175 0.050241977 0.050669404 0.050976425 0.051171530 0.052468822 0.052499173 0.052827382 0.052891324 0.054262261 0.054645912 0.055380946 0.055970728 0.056425627 0.056493157 0.056942302 0.058231713 0.060226367 0.060532455 0.061398818 0.061809945 0.062860175 0.063976384 0.064965030 0.065513905 0.066265380 0.067558159 0.068668367 0.070030292 0.072527188 0.074193848 0.074302089 0.076066011 0.077496427 0.083270331 0.084690904 0.086679358 0.086972335 0.087556024 0.090255132 0.090692832 0.092923636 0.094572927 0.095176409 0.096291464 0.096968517 0.097685701 0.098693078 0.099462222 0.100145306 0.102277636 0.102585428 0.102969400 0.103326978 0.103893585 0.104537043 0.106697161 0.107294674 0.107911539 0.108965898 0.110172538 0.111701867 0.112291247 0.113078980 0.114730557 0.116093081 0.118801585 0.120550490 0.121230367 0.122157449 0.123803369 0.125194330 0.126209148 0.126805722 0.131631589 0.134789791 0.135495213 0.142382613 0.143404152 0.146785610 0.147127289 0.149574921 0.151805922 0.154421660 0.155564927 0.156566947 0.160829319 0.161643820 0.173214723 0.173710547 0.178828748 0.183894631 0.184906455 0.188885124 0.189964977 0.193783760 0.193842318 0.198228995 0.199969556 0.204881730 0.206758799 0.207059473 0.209684379 0.211136921 0.215171484 0.217160046 0.217551536 0.220327054 0.224828063 0.226189033 0.231743116 0.234706829 0.235326829 0.235601914 0.244441881 0.255668405 0.256980496 0.262676083 0.269481336 0.279682975 0.282850958 0.286134804 0.291262574 0.295750089 0.304153018 0.305469389 0.307061448 0.313167297 0.316207319 0.316610427 0.321865600 0.329118249 0.332120173 0.349985953 0.351719309 0.354486986 0.355332343 0.359812205 0.362610858 0.363041423 0.383295244 0.385654427 0.391536136 0.410295403 0.425216310 0.429701643 0.453611554 0.468474276 0.474072496 0.481296940 0.482492456 0.486776189 0.490096506 0.508442359 0.514620913 0.534870303 0.566018075 0.572616184 0.591736986 0.593372781 0.606210508 0.607368642 0.643804296 0.646013848 0.647915140 0.674137543 0.677256252 0.684681357 0.691337046 0.692924085 0.699216377 0.704062407 0.716829100 0.741167550 0.751153747 0.758235123 0.764951354 0.772225370 0.778688949 0.810399304 0.812538621 0.815961639 0.821551399 0.821759587 0.827932273 0.831243425 0.835402820 0.836406652 0.845087543 0.845655239 0.848052630 0.857913318 0.864481513 0.865262411 0.873077873 0.880862531 0.884242884 0.889252500 0.891789635 0.900474457 0.903709625 0.920327319 0.923301567 0.932946758 0.935015236 0.964719550 0.975619057 0.985597026 1.000903527 1.017231771 1.026975815 1.041219259 1.049958445 1.057181841 1.067687332 1.086509629 1.088409374 1.103315533 1.106078768 1.112192674 1.119399662 1.123399514 1.135210690 1.142470633 1.171483674 1.173902957 1.180783763 1.186116490 1.189492942 1.195660786 1.223537724 1.227011676 1.274192652 1.300762503 1.318839112 1.327727653 1.332481187 1.333910739 1.335617185 1.340029865 1.342589440 1.344860235 1.358438031 1.376473535 1.382802635 1.383865706 1.408578152 1.419468059 1.433136014 1.551374843 1.666765536 1.774550382</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">161</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34348044" y3="0.03674104" z3="-0.19311456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39082674" y3="0.15767093" z3="0.41302808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64927424" y3="0.43200033" z3="-0.34369983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72484953" y3="1.22798755" z3="-2.25714459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38893888" y3="0.42109229" z3="-1.18255335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72356462" y3="0.8388446" z3="-3.65497384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62698127" y3="1.74114577" z3="-3.12518911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36932914" y3="2.5855087" z3="-4.59636786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55375095" y3="1.24311983" z3="-4.36395314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48889463" y3="2.92154465" z3="-5.15281005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92368347" y3="-0.49185037" z3="-3.44064389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10018481" y3="0.02777519" z3="-0.99931486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40384288" y3="-1.11319748" z3="-2.00222913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9323155" y3="-0.9865908" z3="-1.82523441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10867572" y3="-2.43693386" z3="-1.85487705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13692948" y3="-3.6083218" z3="0.66560361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01274309" y3="-5.27216904" z3="-4.7435486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24118597" y3="-5.00914361" z3="-3.70709619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83730115" y3="-4.3063912" z3="-1.09042327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78495059" y3="-4.60377655" z3="-2.85546523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55790297" y3="-5.09014517" z3="-3.25000262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85714882" y3="-4.73260106" z3="-1.93767754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49938594" y3="-4.26838944" z3="-1.53051355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8197696" y3="-4.53253672" z3="-3.20144493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35682143" y3="-5.40370189" z3="-3.92457992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89409806" y3="-4.76377973" z3="-1.59556621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02585706" y3="-3.85271146" z3="0.22874407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16583033" y3="-3.64038499" z3="0.87444369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05310757" y3="-4.10523091" z3="0.44214429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16068431" y3="-3.50210711" z3="2.34105398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21866084" y3="-3.31330127" z3="5.13863976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35650561" y3="-3.70715953" z3="3.04498609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99348223" y3="-3.20872388" z3="3.06207061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01950503" y3="-3.11558134" z3="4.45062228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38482881" y3="-3.6146449" z3="4.43362358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26959018" y3="-3.95151426" z3="2.49758923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03315475" y3="-3.07627255" z3="2.55707323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08824543" y3="-2.91112026" z3="4.98936694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32210298" y3="-3.78690915" z3="4.96921446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2380329" y3="-3.2490634" z3="6.23022611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42320052" y3="-3.90870039" z3="-0.62684029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18102811" y3="-3.40633431" z3="-1.08058926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51582039" y3="0.23678577" z3="-4.70599452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0788722" y3="-1.7161725" z3="0.01535195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89810555" y3="-0.96318903" z3="1.17479271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83362246" y3="-0.31491574" z3="1.5026263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36391495" y3="0.56818856" z3="1.20851578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4347932" y3="1.45297522" z3="-0.42607283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99392721" y3="-0.67861614" z3="1.40694195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3706597" y3="1.77452537" z3="2.6418279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86991862" y3="-0.94949985" z3="2.07616899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6351071" y3="-0.3342021" z3="3.33318723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20085698" y3="0.75393443" z3="-1.24770178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34293201" y3="2.23807048" z3="-0.42750055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41157366" y3="1.94226294" z3="-0.59089297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0168088" y3="-1.03744358" z3="2.44939199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96657403" y3="-0.21413849" z3="1.1719222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87620288" y3="-1.52455717" z3="0.71039853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43054727" y3="1.24471909" z3="3.60903577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56119396" y3="2.3688397" z3="2.64130873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21735618" y3="2.48101871" z3="2.57819441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77169178" y3="-0.79150903" z3="3.84273394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54792819" y3="-0.50568601" z3="3.91894875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46284409" y3="0.74763301" z3="3.21075962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84666576" y3="-0.72155239" z3="0.98986806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4127922" y3="-2.04579434" z3="0.84948135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75941588" y3="-2.69030469" z3="1.89256757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55763342" y3="-1.99781839" z3="3.08320032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04511577" y3="-0.70936016" z3="3.28034684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69796602" y3="-0.07832691" z3="2.22609523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51175162" y3="-2.5421742" z3="-0.11791108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35602381" y3="-3.69631101" z3="1.76697655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69330756" y3="-2.59383755" z3="4.10678249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86756952" y3="-0.19998194" z3="4.22766649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04688993" y3="0.95120127" z3="2.34276228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80324263" y3="0.45783209" z3="-4.28789834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78231499" y3="-0.51028002" z3="-4.46914968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43190464" y3="-1.70305491" z3="-5.09088389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14368176" y3="-1.93473241" z3="-5.56324687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82836196" y3="-0.96309793" z3="-5.35914898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.050676" y3="1.38196077" z3="-3.75892923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80221777" y3="-0.36317194" z3="-4.11329804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44280617" y3="-2.75259193" z3="-5.233114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08888743" y3="-2.87600581" z3="-6.06176492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85141762" y3="-1.1496574" z3="-5.68993023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36437318" y3="-1.8971182" z3="5.04671852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31279965" y3="-3.73451862" z3="3.93893852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21780565" y3="-3.65336089" z3="-6.0127339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44587675" y3="-2.66869239" z3="-4.55227604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06996916" y3="1.15863506" z3="-1.49064394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10659415" y3="1.54942752" z3="-2.46581831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43766875" y3="1.49170526" z3="-1.68958491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84405153" y3="2.16375723" z3="-2.81622123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1660195" y3="1.19147893" z3="-0.9299664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89971981" y3="2.40892406" z3="-2.96121993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56308392" y3="2.22619241" z3="-3.63110129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89384937" y3="2.52482587" z3="-3.80134156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83967507" y3="2.5001969" z3="-4.40256827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22237923" y3="3.03961202" z3="-4.70883294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39128594" y3="3.14507945" z3="-3.31412056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27302753" y3="3.55856987" z3="-4.09671598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19602094" y3="4.15524664" z3="-2.71523638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9391297" y3="5.48874962" z3="-2.92922522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02639741" y3="3.8656691" z3="-2.06938477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57284998" y3="6.24433264" z3="-2.45536198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04235385" y3="4.94509185" z3="-4.31296975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85995579" y3="5.89315039" z3="-3.75036568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18882992" y3="5.24354459" z3="-4.92959706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67143707" y3="6.95658797" z3="-3.92060042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47876995" y3="-2.19344591" z3="-0.29739703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45298724" y3="-2.98775199" z3="-1.06290167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00461745" y3="-2.57308269" z3="0.59349782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09415367" y3="-1.37389582" z3="-0.71467901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17831736" y3="-1.42251324" z3="-1.15799008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31311305" y3="-0.38133677" z3="-1.50472821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10144847" y3="-1.55067404" z3="-0.95602913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42354906" y3="-2.07582659" z3="-2.00857519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3435,.0367,-.1931;7.3908,.1577,.413;6.6493,.432,-.3437;4.7248,1.228,-2.2571;4.3889,.4211,-1.1826;2.7236,.8388,-3.655;3.627,1.7411,-3.1252;1.3693,2.5855,-4.5964;1.5538,1.2431,-4.364;.4889,2.9215,-5.1528;2.9237,-.4919,-3.4406;3.1002,.0278,-.9993;2.4038,-1.1132,-2.0022;.9323,-.9866,-1.8252;3.1087,-2.4369,-1.8549;-.1369,-3.6083,.6656;-.0127,-5.2722,-4.7435;-.2412,-5.0091,-3.7071;-.8373,-4.3064,-1.0904;.785,-4.6038,-2.8555;-1.5579,-5.0901,-3.25;-1.8571,-4.7326,-1.9377;.4994,-4.2684,-1.5305;1.8198,-4.5325,-3.2014;-2.3568,-5.4037,-3.9246;-2.8941,-4.7638,-1.5956;-1.0259,-3.8527,.2287;-2.1658,-3.6404,.8744;-3.0531,-4.1052,.4421;-2.1607,-3.5021,2.3411;-2.2187,-3.3133,5.1386;-3.3565,-3.7072,3.045;-.9935,-3.2087,3.0621;-1.0195,-3.1156,4.4506;-3.3848,-3.6146,4.4336;-4.2696,-3.9515,2.4976;-.0332,-3.0763,2.5571;-.0882,-2.9111,4.9894;-4.3221,-3.7869,4.9692;-2.238,-3.2491,6.2302;1.4232,-3.9087,-.6268;2.181,-3.4063,-1.0806;.5158,.2368,-4.706;-3.0789,-1.7162,.0154;-2.8981,-.9632,1.1748;-1.8336,-.3149,1.5026;-.3639,.5682,1.2085;-.4348,1.453,-.4261;.9939,-.6786,1.4069;-.3707,1.7745,2.6418;-3.8699,-.9495,2.0762;-3.6351,-.3342,3.3332;-.2009,.7539,-1.2477;.3429,2.2381,-.4275;-1.4116,1.9423,-.5909;1.0168,-1.0374,2.4494;1.9666,-.2141,1.1719;.8762,-1.5246,.7104;-.4305,1.2447,3.609;.5612,2.3688,2.6413;-1.2174,2.481,2.5782;-2.7717,-.7915,3.8427;-4.5479,-.5057,3.9189;-3.4628,.7476,3.2108;4.8467,-.7216,.9899;4.4128,-2.0458,.8495;3.7594,-2.6903,1.8926;3.5576,-1.9978,3.0832;4.0451,-.7094,3.2803;4.698,-.0783,2.2261;4.5118,-2.5422,-.1179;3.356,-3.6963,1.767;2.6933,-2.5938,4.1068;3.8676,-.2,4.2277;5.0469,.9512,2.3428;-.8032,.4578,-4.2879;-1.7823,-.5103,-4.4691;-1.4319,-1.7031,-5.0909;-.1437,-1.9347,-5.5632;.8284,-.9631,-5.3591;-1.0507,1.382,-3.7589;-2.8022,-.3632,-4.1133;-2.4428,-2.7526,-5.2331;.0889,-2.876,-6.0618;1.8514,-1.1497,-5.6899;2.3644,-1.8971,5.0467;2.3128,-3.7345,3.9389;-2.2178,-3.6534,-6.0127;-3.4459,-2.6687,-4.5523;7.07,1.1586,-1.4906;6.1066,1.5494,-2.4658;8.4377,1.4917,-1.6896;8.8441,2.1638,-2.8162;9.166,1.1915,-.93;9.8997,2.4089,-2.9612;6.5631,2.2262,-3.6311;7.8938,2.5248,-3.8013;5.8397,2.5002,-4.4026;8.2224,3.0396,-4.7088;3.3913,3.1451,-3.3141;2.273,3.5586,-4.0967;4.196,4.1552,-2.7152;3.9391,5.4887,-2.9292;5.0264,3.8657,-2.0694;4.5728,6.2443,-2.4554;2.0424,4.9451,-4.313;2.86,5.8932,-3.7504;1.1888,5.2435,-4.9296;2.6714,6.9566,-3.9206;-4.4788,-2.1934,-.2974;-4.453,-2.9878,-1.0629;-5.0046,-2.5731,.5935;-5.0942,-1.3739,-.7147;-2.1783,-1.4225,-1.158;-2.3131,-.3813,-1.5047;-1.1014,-1.5507,-.956;-2.4235,-2.0758,-2.0086;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650409812662</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002568634346 0.000371015936 0.018744289977 0.005337453921</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030506410 -0.000863326 0.000060369 0.000265967 0.000291335 0.000358680 0.000400540 0.000472785 0.000604847 0.000787069 0.000918144 0.001110510 0.001254251 0.001260447 0.001379380 0.001390523 0.001658873 0.001722245 0.001806304 0.001972524 0.002147532 0.002465975 0.002604964 0.002683910 0.002811255 0.003109229 0.003257785 0.003415449 0.003850699 0.003934064 0.004332040 0.004727427 0.004818163 0.004974772 0.005819031 0.006007672 0.006187411 0.006547747 0.006778408 0.007488795 0.007883070 0.008099748 0.009091780 0.009394165 0.009829349 0.010699792 0.011100337 0.011497903 0.011722453 0.011983865 0.012817597 0.013065376 0.013859273 0.014296564 0.014908495 0.015286543 0.015586551 0.015753419 0.015962424 0.016795913 0.017268136 0.017538790 0.018793834 0.019277285 0.019598471 0.020502742 0.021149197 0.021299176 0.022304873 0.023069959 0.024885210 0.025874724 0.026543041 0.026811288 0.027131123 0.028872757 0.029322631 0.031398408 0.032951713 0.033269822 0.033650121 0.035317187 0.035588444 0.037241316 0.038862064 0.039538869 0.040508860 0.041208503 0.041873427 0.044344883 0.045163896 0.046216305 0.047115390 0.049136341 0.050241408 0.050669808 0.050976471 0.051176614 0.052469033 0.052499837 0.052828762 0.052899962 0.054295923 0.054646042 0.055405242 0.055984155 0.056425812 0.056494374 0.056948818 0.058236941 0.060226358 0.060535806 0.061405692 0.061825428 0.062861387 0.064049038 0.064966454 0.065529718 0.066265980 0.067558459 0.068697659 0.070031464 0.072528407 0.074196661 0.074319549 0.076067968 0.077497816 0.083283301 0.084711011 0.086683944 0.086977490 0.087581872 0.090259314 0.090701066 0.092925169 0.094573409 0.095181116 0.096291472 0.097010030 0.097690785 0.098696309 0.099465379 0.100146707 0.102277562 0.102591095 0.102982825 0.103330521 0.103893546 0.104610307 0.106697051 0.107294879 0.107995447 0.108966164 0.110174567 0.111723419 0.112292545 0.113082388 0.114733629 0.116096952 0.118802714 0.120552215 0.121231063 0.122162943 0.123806588 0.125194754 0.126212297 0.126807290 0.131635569 0.134813128 0.135498340 0.142383467 0.143404143 0.146786136 0.147127240 0.149581382 0.151807278 0.154429428 0.155565497 0.156572205 0.160830721 0.161643720 0.173220220 0.173711560 0.178847584 0.183895220 0.184915874 0.188887469 0.189965756 0.193789619 0.193843804 0.198230070 0.199994672 0.204881489 0.206758926 0.207068991 0.209693187 0.211177508 0.215174539 0.217175024 0.217567175 0.220338801 0.224829273 0.226192757 0.231749801 0.234714726 0.235330018 0.235603591 0.244441880 0.255677099 0.256982071 0.262686505 0.269490502 0.279697855 0.282855249 0.286136965 0.291266391 0.295753633 0.304153508 0.305469804 0.307064542 0.313169190 0.316208720 0.316632379 0.321871080 0.329127008 0.332123735 0.350011872 0.351747152 0.354519731 0.355339627 0.359812060 0.362617961 0.363080017 0.383309905 0.385654483 0.391536500 0.410321226 0.425218756 0.429701288 0.454079499 0.468476749 0.474094194 0.481460498 0.482544256 0.486782996 0.490104191 0.508442398 0.514628532 0.534874466 0.566018331 0.572638367 0.591741566 0.593378379 0.606217410 0.607368627 0.643897209 0.646069767 0.647954302 0.674137753 0.677267003 0.684731568 0.691342538 0.692925906 0.699230723 0.704081963 0.716829245 0.741169318 0.751153861 0.758237463 0.765012475 0.772225698 0.778702027 0.810399338 0.812544571 0.816088685 0.821555591 0.821782545 0.828001485 0.831243791 0.835435473 0.836457435 0.845090411 0.845655309 0.848052762 0.857959592 0.864485524 0.865275827 0.873081168 0.880873736 0.884242950 0.889253576 0.891794816 0.900478476 0.903712982 0.920328638 0.923301773 0.932951674 0.935021404 0.964731620 0.975619065 0.985597057 1.000903526 1.017249098 1.026976237 1.041228456 1.049990620 1.057182374 1.067687417 1.086510621 1.088409440 1.103346473 1.106107742 1.112192890 1.119421840 1.123401035 1.135235267 1.142473865 1.171826485 1.173903004 1.180783968 1.186121701 1.189588170 1.195714821 1.223541437 1.227031859 1.274202322 1.300817523 1.318852892 1.327728548 1.332507841 1.333917602 1.335627002 1.340122451 1.342606969 1.344861611 1.358442914 1.376535050 1.382802768 1.383878193 1.408582115 1.419468311 1.433191108 1.551380190 1.667198289 1.774561176</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">162</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34234637" y3="0.04186152" z3="-0.19332638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38842405" y3="0.16036175" z3="0.4145618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64812057" y3="0.43511365" z3="-0.34303398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72666707" y3="1.23213184" z3="-2.25897344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38917306" y3="0.42638188" z3="-1.18391691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72708938" y3="0.84094186" z3="-3.65948858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62989105" y3="1.74421299" z3="-3.1292769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37585629" y3="2.58547596" z3="-4.60777197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55822556" y3="1.24442119" z3="-4.37085461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49586548" y3="2.92088276" z3="-5.165462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92623447" y3="-0.48959336" z3="-3.44281148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09990573" y3="0.03333579" z3="-1.00168491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4036298" y3="-1.10797561" z3="-2.00433125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93207566" y3="-0.97916486" z3="-1.82959033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10693253" y3="-2.43240845" z3="-1.85464839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13994162" y3="-3.61311146" z3="0.67021475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01884523" y3="-5.26290279" z3="-4.74332046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24569678" y3="-5.00446305" z3="-3.70549485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84049772" y3="-4.30950818" z3="-1.08655784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78035449" y3="-4.59699864" z3="-2.85477817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56176054" y3="-5.0908834" z3="-3.24650349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85961218" y3="-4.73854335" z3="-1.93257604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49446459" y3="-4.26356576" z3="-1.52919389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81253553" y3="-4.51776203" z3="-3.20248165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36301855" y3="-5.40238034" z3="-3.92116506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89615399" y3="-4.77424703" z3="-1.58846122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02870518" y3="-3.85793641" z3="0.23340017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1684441" y3="-3.64393938" z3="0.87901442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05633754" y3="-4.10756423" z3="0.44667041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16235351" y3="-3.50673447" z3="2.34587721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21931265" y3="-3.31759147" z3="5.14349156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35850419" y3="-3.70981453" z3="3.04975506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99488882" y3="-3.21450014" z3="3.0668182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02088305" y3="-3.12044349" z3="4.45529637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38606701" y3="-3.61735811" z3="4.43852704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2759275" y3="-3.9471577" z3="2.50158071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03699887" y3="-3.07935893" z3="2.56151384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09372002" y3="-2.91037952" z3="4.99324902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3250679" y3="-3.78524303" z3="4.97402736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23970094" y3="-3.25095356" z3="6.23478254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41437288" y3="-3.89713054" z3="-0.62704708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17642782" y3="-3.39843868" z3="-1.08202434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51947539" y3="0.23848813" z3="-4.71033532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07798764" y3="-1.7190077" z3="0.01914763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90073475" y3="-0.96618107" z3="1.17893705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83855268" y3="-0.31546151" z3="1.50927783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36540677" y3="0.56141772" z3="1.21284013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4391095" y3="1.453402" z3="-0.41780713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98903639" y3="-0.69090208" z3="1.40197982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36124451" y3="1.76095901" z3="2.65217343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87419836" y3="-0.95463684" z3="2.07816484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64456338" y3="-0.33772853" z3="3.33458324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20259974" y3="0.75884964" z3="-1.24123014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34145807" y3="2.23850788" z3="-0.41709177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41575093" y3="1.94096685" z3="-0.58157527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01380515" y3="-1.05243669" z3="2.44357321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96275657" y3="-0.2281145" z3="1.16602551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86805506" y3="-1.5351363" z3="0.70403735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41994684" y3="1.2259748" z3="3.61653762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57341045" y3="2.35104306" z3="2.65158016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20513724" y3="2.47146559" z3="2.5956196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78362296" y3="-0.79437225" z3="3.84825631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55977517" y3="-0.50846583" z3="3.91667994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47156142" y3="0.74412253" z3="3.2114453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84412343" y3="-0.71692192" z3="0.98864104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41290213" y3="-2.04208518" z3="0.8475113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75936637" y3="-2.68791951" z3="1.88962032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5536314" y3="-1.99563965" z3="3.0790349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03829432" y3="-0.70604895" z3="3.27706649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69180416" y3="-0.07372014" z3="2.22413584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51521436" y3="-2.53855795" z3="-0.11871066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35951429" y3="-3.69482898" z3="1.76481016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69164072" y3="-2.59391717" z3="4.10337985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85985402" y3="-0.19737448" z3="4.22541317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03956924" y3="0.9565151" z3="2.34188021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79848591" y3="0.45951845" z3="-4.28863768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7780411" y3="-0.50805344" z3="-4.46773791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42880134" y3="-1.70074273" z3="-5.09060727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14130679" y3="-1.93210594" z3="-5.564591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83088355" y3="-0.96145642" z3="-5.36516182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04411846" y3="1.38345375" z3="-3.75874737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79787686" y3="-0.36182211" z3="-4.11013888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44044922" y3="-2.7505064" z3="-5.23211327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08973447" y3="-2.87330136" z3="-6.06370822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85339485" y3="-1.14783329" z3="-5.69747626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36153831" y3="-1.8984627" z3="5.04502537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31717334" y3="-3.73534448" z3="3.93748125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21654456" y3="-3.65212765" z3="-6.01119935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44301214" y3="-2.66524415" z3="-4.55138329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07042417" y3="1.16153983" z3="-1.48971701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10864753" y3="1.55237119" z3="-2.46638448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43850411" y3="1.49480195" z3="-1.6866573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84664398" y3="2.16580341" z3="-2.81323652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16571742" y3="1.19568931" z3="-0.92543257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90270011" y3="2.41195865" z3="-2.95648628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56703056" y3="2.22795816" z3="-3.63166367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89789034" y3="2.525577" z3="-3.80027338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84508584" y3="2.5017747" z3="-4.40450147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22781334" y3="3.03865831" z3="-4.70785296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39502496" y3="3.14823906" z3="-3.32098067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27896907" y3="3.56018683" z3="-4.10732845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19932505" y3="4.15924467" z3="-2.72271257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94453071" y3="5.49211434" z3="-2.94085039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02905453" y3="3.86989481" z3="-2.07576621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57934147" y3="6.24711523" z3="-2.46937693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04955575" y3="4.94663432" z3="-4.32661568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86652206" y3="5.89596613" z3="-3.76394492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19731505" y3="5.24424262" z3="-4.94542139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67848485" y3="6.95964775" z3="-3.93623714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4765569" y3="-2.19669231" z3="-0.29738897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44777724" y3="-2.98986044" z3="-1.06334796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0042404" y3="-2.57786708" z3="0.59151978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09145689" y3="-1.37726978" z3="-0.71557732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17570117" y3="-1.42465012" z3="-1.15274166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3114883" y3="-0.38409278" z3="-1.50048436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09922909" y3="-1.5509994" z3="-0.94946461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41942985" y3="-2.07861513" z3="-2.00372561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3423,.0419,-.1933;7.3884,.1604,.4146;6.6481,.4351,-.343;4.7267,1.2321,-2.259;4.3892,.4264,-1.1839;2.7271,.8409,-3.6595;3.6299,1.7442,-3.1293;1.3759,2.5855,-4.6078;1.5582,1.2444,-4.3709;.4959,2.9209,-5.1655;2.9262,-.4896,-3.4428;3.0999,.0333,-1.0017;2.4036,-1.108,-2.0043;.9321,-.9792,-1.8296;3.1069,-2.4324,-1.8546;-.1399,-3.6131,.6702;-.0188,-5.2629,-4.7433;-.2457,-5.0045,-3.7055;-.8405,-4.3095,-1.0866;.7804,-4.597,-2.8548;-1.5618,-5.0909,-3.2465;-1.8596,-4.7385,-1.9326;.4945,-4.2636,-1.5292;1.8125,-4.5178,-3.2025;-2.363,-5.4024,-3.9212;-2.8962,-4.7742,-1.5885;-1.0287,-3.8579,.2334;-2.1684,-3.6439,.879;-3.0563,-4.1076,.4467;-2.1624,-3.5067,2.3459;-2.2193,-3.3176,5.1435;-3.3585,-3.7098,3.0498;-.9949,-3.2145,3.0668;-1.0209,-3.1204,4.4553;-3.3861,-3.6174,4.4385;-4.2759,-3.9472,2.5016;-.037,-3.0794,2.5615;-.0937,-2.9104,4.9932;-4.3251,-3.7852,4.974;-2.2397,-3.251,6.2348;1.4144,-3.8971,-.627;2.1764,-3.3984,-1.082;.5195,.2385,-4.7103;-3.078,-1.719,.0191;-2.9007,-.9662,1.1789;-1.8386,-.3155,1.5093;-.3654,.5614,1.2128;-.4391,1.4534,-.4178;.989,-.6909,1.402;-.3612,1.761,2.6522;-3.8742,-.9546,2.0782;-3.6446,-.3377,3.3346;-.2026,.7588,-1.2412;.3415,2.2385,-.4171;-1.4158,1.941,-.5816;1.0138,-1.0524,2.4436;1.9628,-.2281,1.166;.8681,-1.5351,.704;-.4199,1.226,3.6165;.5734,2.351,2.6516;-1.2051,2.4715,2.5956;-2.7836,-.7944,3.8483;-4.5598,-.5085,3.9167;-3.4716,.7441,3.2114;4.8441,-.7169,.9886;4.4129,-2.0421,.8475;3.7594,-2.6879,1.8896;3.5536,-1.9956,3.079;4.0383,-.706,3.2771;4.6918,-.0737,2.2241;4.5152,-2.5386,-.1187;3.3595,-3.6948,1.7648;2.6916,-2.5939,4.1034;3.8599,-.1974,4.2254;5.0396,.9565,2.3419;-.7985,.4595,-4.2886;-1.778,-.5081,-4.4677;-1.4288,-1.7007,-5.0906;-.1413,-1.9321,-5.5646;.8309,-.9615,-5.3652;-1.0441,1.3835,-3.7587;-2.7979,-.3618,-4.1101;-2.4404,-2.7505,-5.2321;.0897,-2.8733,-6.0637;1.8534,-1.1478,-5.6975;2.3615,-1.8985,5.045;2.3172,-3.7353,3.9375;-2.2165,-3.6521,-6.0112;-3.443,-2.6652,-4.5514;7.0704,1.1615,-1.4897;6.1086,1.5524,-2.4664;8.4385,1.4948,-1.6867;8.8466,2.1658,-2.8132;9.1657,1.1957,-.9254;9.9027,2.412,-2.9565;6.567,2.228,-3.6317;7.8979,2.5256,-3.8003;5.8451,2.5018,-4.4045;8.2278,3.0387,-4.7079;3.395,3.1482,-3.321;2.279,3.5602,-4.1073;4.1993,4.1592,-2.7227;3.9445,5.4921,-2.9409;5.0291,3.8699,-2.0758;4.5793,6.2471,-2.4694;2.0496,4.9466,-4.3266;2.8665,5.896,-3.7639;1.1973,5.2442,-4.9454;2.6785,6.9596,-3.9362;-4.4766,-2.1967,-.2974;-4.4478,-2.9899,-1.0633;-5.0042,-2.5779,.5915;-5.0915,-1.3773,-.7156;-2.1757,-1.4247,-1.1527;-2.3115,-.3841,-1.5005;-1.0992,-1.551,-.9495;-2.4194,-2.0786,-2.0037;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411889868</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002804839278 0.000401365903 0.019956043096 0.005339580978</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030507037 -0.000985310 -0.000018559 0.000203539 0.000271736 0.000358921 0.000403971 0.000473882 0.000605721 0.000789263 0.000919093 0.001112024 0.001257130 0.001261707 0.001376984 0.001392300 0.001656876 0.001722938 0.001805771 0.001964849 0.002132181 0.002465261 0.002580277 0.002684724 0.002814362 0.003124260 0.003243094 0.003418380 0.003852605 0.003934466 0.004331244 0.004698170 0.004804706 0.004972913 0.005812464 0.006047773 0.006187855 0.006543645 0.006781564 0.007488373 0.007880748 0.008106804 0.009085187 0.009397056 0.009834400 0.010706934 0.011053247 0.011514043 0.011692549 0.011978870 0.012819563 0.013100233 0.013859642 0.014330681 0.014912021 0.015286820 0.015585516 0.015808350 0.015962703 0.016800762 0.017265974 0.017603612 0.018793138 0.019283658 0.019617503 0.020506488 0.021147761 0.021303993 0.022304965 0.023070334 0.024893404 0.025876215 0.026544081 0.026807823 0.027135626 0.028882756 0.029323694 0.031399390 0.032972439 0.033269198 0.033653204 0.035329565 0.035624865 0.037250333 0.039070099 0.039622051 0.040508338 0.041405397 0.041925741 0.044358831 0.045153893 0.046238358 0.047114161 0.049137299 0.050240291 0.050677836 0.050976184 0.051181536 0.052469120 0.052499911 0.052829562 0.052907847 0.054339683 0.054643356 0.055417784 0.056005268 0.056426374 0.056494616 0.056955856 0.058249894 0.060227627 0.060536212 0.061409006 0.061844456 0.062871318 0.064096712 0.064966352 0.065551647 0.066267226 0.067558784 0.068736373 0.070033787 0.072524783 0.074199592 0.074338236 0.076062856 0.077506404 0.083287143 0.084730777 0.086689496 0.086984415 0.087609272 0.090266038 0.090715957 0.092928426 0.094573988 0.095185136 0.096291825 0.097063665 0.097697459 0.098697177 0.099467998 0.100146767 0.102277288 0.102609459 0.103006765 0.103329444 0.103891051 0.104678521 0.106699500 0.107296966 0.108124588 0.108970394 0.110180986 0.111763120 0.112294618 0.113090949 0.114732116 0.116098485 0.118806093 0.120548576 0.121233418 0.122163370 0.123814614 0.125195212 0.126212558 0.126817853 0.131635550 0.134836715 0.135512192 0.142386506 0.143403077 0.146787608 0.147127661 0.149590035 0.151827247 0.154444554 0.155569855 0.156580297 0.160832148 0.161644894 0.173227125 0.173714991 0.178890859 0.183895884 0.184924306 0.188882971 0.189958154 0.193789648 0.193849699 0.198233769 0.199994630 0.204866817 0.206758873 0.207077326 0.209705139 0.211220554 0.215175540 0.217197915 0.217592665 0.220360433 0.224830880 0.226196595 0.231753710 0.234726344 0.235333902 0.235607222 0.244442059 0.255683113 0.256982483 0.262687566 0.269517425 0.279731370 0.282856511 0.286137105 0.291274533 0.295758794 0.304155870 0.305468800 0.307070777 0.313174920 0.316209403 0.316666341 0.321876299 0.329135728 0.332130637 0.350047295 0.351775085 0.354578900 0.355354654 0.359810938 0.362619003 0.363094500 0.383311746 0.385663175 0.391535808 0.410359264 0.425217071 0.429707380 0.454893431 0.468481674 0.474107011 0.481541653 0.482616018 0.486789173 0.490115339 0.508445863 0.514647085 0.534886888 0.566011387 0.572659808 0.591745177 0.593380673 0.606219183 0.607381222 0.643989805 0.646122778 0.647990993 0.674137621 0.677290059 0.684770518 0.691350298 0.692925893 0.699244111 0.704098295 0.716833074 0.741171713 0.751154757 0.758242819 0.765104978 0.772228159 0.778713709 0.810398227 0.812552397 0.816220819 0.821554773 0.821818571 0.828171834 0.831244412 0.835465800 0.836524255 0.845092003 0.845659637 0.848058718 0.858031153 0.864485036 0.865294980 0.873082107 0.880893242 0.884245352 0.889260825 0.891797579 0.900504276 0.903715849 0.920334130 0.923301875 0.932953798 0.935028790 0.964757717 0.975619406 0.985598943 1.000904910 1.017250690 1.026984853 1.041234316 1.050039064 1.057186577 1.067696504 1.086510575 1.088408557 1.103383181 1.106120850 1.112192889 1.119434215 1.123403846 1.135274095 1.142484764 1.172335290 1.173903539 1.180785640 1.186126149 1.189625483 1.195740747 1.223547536 1.227043865 1.274193014 1.300875884 1.318874737 1.327731378 1.332543023 1.333918738 1.335625413 1.340231628 1.342611756 1.344864118 1.358441543 1.376629844 1.382795914 1.383879377 1.408600747 1.419469924 1.433200866 1.551383585 1.667691318 1.774584167</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">163</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3405638" y3="0.04623471" z3="-0.19416474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38646681" y3="0.1637823" z3="0.41584999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64710021" y3="0.43918258" z3="-0.34246397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72818427" y3="1.23568633" z3="-2.26126444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38862719" y3="0.43160326" z3="-1.18554004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73002531" y3="0.84491525" z3="-3.66313589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63331498" y3="1.7477674" z3="-3.133873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38117439" y3="2.58981613" z3="-4.61528323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56249592" y3="1.24825051" z3="-4.3764134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50261834" y3="2.92437352" z3="-5.17565628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92755107" y3="-0.485433" z3="-3.44397585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09882371" y3="0.04109342" z3="-1.00355683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40134318" y3="-1.10034474" z3="-2.00528207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92976144" y3="-0.96846714" z3="-1.8334622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1016612" y3="-2.42585082" z3="-1.85187399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14240981" y3="-3.61693644" z3="0.67485443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02293158" y3="-5.25406024" z3="-4.74268853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24985277" y3="-4.99756703" z3="-3.70430611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84325302" y3="-4.31013927" z3="-1.08300205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7756131" y3="-4.58718117" z3="-2.8546478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56429917" y3="-5.09118335" z3="-3.24312207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86201562" y3="-4.74195875" z3="-1.92820023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49150004" y3="-4.25903314" z3="-1.52752265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80784605" y3="-4.50440591" z3="-3.20377603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36288591" y3="-5.40765838" z3="-3.9165955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8975368" y3="-4.78350768" z3="-1.58215706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0312485" y3="-3.86179444" z3="0.23801579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17126323" y3="-3.64726789" z3="0.88311914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05906919" y3="-4.11085799" z3="0.45083445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16600633" y3="-3.50898562" z3="2.34981085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22325208" y3="-3.31821858" z3="5.14733671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36204565" y3="-3.71140945" z3="3.05390982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99816215" y3="-3.21784031" z3="3.07073176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02395759" y3="-3.12313546" z3="4.45911827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38968555" y3="-3.61841404" z3="4.44259132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27546637" y3="-3.95432119" z3="2.50674802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03704097" y3="-3.08916767" z3="2.5657564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09217492" y3="-2.91960741" z3="4.99728109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32665568" y3="-3.78934234" z3="4.97838376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24226174" y3="-3.25331915" z3="6.23891313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41467703" y3="-3.89440564" z3="-0.62530236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17138035" y3="-3.39083518" z3="-1.07938667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52311399" y3="0.24188802" z3="-4.71515141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07892817" y3="-1.72301405" z3="0.02145864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90447382" y3="-0.97010312" z3="1.18203347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84253867" y3="-0.31952826" z3="1.51511979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36760433" y3="0.5538143" z3="1.21838277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44373003" y3="1.4526662" z3="-0.40843084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98474327" y3="-0.70155228" z3="1.39739908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35626164" y3="1.74695724" z3="2.66253523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88040886" y3="-0.95816197" z3="2.07893111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65284629" y3="-0.34124007" z3="3.33659001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20962227" y3="0.76075796" z3="-1.23640481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33250595" y3="2.23953276" z3="-0.40505087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42200178" y3="1.94157522" z3="-0.56746877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01453642" y3="-1.06512348" z3="2.43775398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95654295" y3="-0.23812338" z3="1.15797844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.859871" y3="-1.544058" z3="0.69771319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41403167" y3="1.20850905" z3="3.62528218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58001438" y3="2.33422729" z3="2.66126476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19802642" y3="2.46040386" z3="2.61123958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79122479" y3="-0.79631335" z3="3.85111033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56842815" y3="-0.51348742" z3="3.91825745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48226693" y3="0.74057433" z3="3.21371463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84148927" y3="-0.7124575" z3="0.98763722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41376415" y3="-2.0386436" z3="0.84717929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76147369" y3="-2.68548081" z3="1.88957209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55414796" y3="-1.99322789" z3="3.07929235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03434573" y3="-0.70210533" z3="3.27607441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68652471" y3="-0.06882901" z3="2.22280549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51700666" y3="-2.53524123" z3="-0.11940959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36330202" y3="-3.69331986" z3="1.7642542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69100769" y3="-2.59254655" z3="4.10200191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8525535" y3="-0.19302106" z3="4.22290161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03075277" y3="0.96229686" z3="2.33955371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79425919" y3="0.46241995" z3="-4.29089015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77396112" y3="-0.505837" z3="-4.46742863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42620932" y3="-1.69832681" z3="-5.090721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13978408" y3="-1.92950635" z3="-5.56899231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83308303" y3="-0.95788037" z3="-5.36955776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03920668" y3="1.38638481" z3="-3.76079901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79229713" y3="-0.35923408" z3="-4.10685575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43790539" y3="-2.74757013" z3="-5.22878989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09079721" y3="-2.87059498" z3="-6.06838778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85485247" y3="-1.14414634" z3="-5.70463824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35898495" y3="-1.89741165" z3="5.04197742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31425801" y3="-3.73433322" z3="3.9332667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21489459" y3="-3.65004338" z3="-6.0070725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43987661" y3="-2.66207637" z3="-4.54630216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07124726" y3="1.16414623" z3="-1.4892425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11076554" y3="1.55423838" z3="-2.4675334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43970442" y3="1.49578237" z3="-1.68508784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84966331" y3="2.16501643" z3="-2.81209462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16574654" y3="1.19686249" z3="-0.92269515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90582678" y3="2.40917489" z3="-2.95468691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57101927" y3="2.2274439" z3="-3.63334321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90243063" y3="2.52429051" z3="-3.80075083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85010094" y3="2.50074344" z3="-4.40735246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23380396" y3="3.03611742" z3="-4.70874215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4005135" y3="3.15136704" z3="-3.3293044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28565559" y3="3.56340213" z3="-4.1174902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20523636" y3="4.16271995" z3="-2.73220757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9521376" y3="5.49579298" z3="-2.95346657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03280686" y3="3.87438738" z3="-2.08222248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58601923" y3="6.25231788" z3="-2.4810995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05892183" y3="4.94930862" z3="-4.34120954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87668848" y3="5.89850233" z3="-3.78025363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20814917" y3="5.24649609" z3="-4.96218597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69116338" y3="6.96160815" z3="-3.95619318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47722448" y3="-2.20040335" z3="-0.29811502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44802884" y3="-2.99347261" z3="-1.06502664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00640524" y3="-2.58177312" z3="0.59016367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0914953" y3="-1.38039967" z3="-0.71628176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17373251" y3="-1.42744587" z3="-1.14767851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30865987" y3="-0.38619232" z3="-1.49522531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0977562" y3="-1.5537397" z3="-0.94098622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41377251" y3="-2.08115037" z3="-1.99925884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3406,.0462,-.1942;7.3865,.1638,.4158;6.6471,.4392,-.3425;4.7282,1.2357,-2.2613;4.3886,.4316,-1.1855;2.73,.8449,-3.6631;3.6333,1.7478,-3.1339;1.3812,2.5898,-4.6153;1.5625,1.2483,-4.3764;.5026,2.9244,-5.1757;2.9276,-.4854,-3.444;3.0988,.0411,-1.0036;2.4013,-1.1003,-2.0053;.9298,-.9685,-1.8335;3.1017,-2.4259,-1.8519;-.1424,-3.6169,.6749;-.0229,-5.2541,-4.7427;-.2499,-4.9976,-3.7043;-.8433,-4.3101,-1.083;.7756,-4.5872,-2.8546;-1.5643,-5.0912,-3.2431;-1.862,-4.742,-1.9282;.4915,-4.259,-1.5275;1.8078,-4.5044,-3.2038;-2.3629,-5.4077,-3.9166;-2.8975,-4.7835,-1.5822;-1.0312,-3.8618,.238;-2.1713,-3.6473,.8831;-3.0591,-4.1109,.4508;-2.166,-3.509,2.3498;-2.2233,-3.3182,5.1473;-3.362,-3.7114,3.0539;-.9982,-3.2178,3.0707;-1.024,-3.1231,4.4591;-3.3897,-3.6184,4.4426;-4.2755,-3.9543,2.5067;-.037,-3.0892,2.5658;-.0922,-2.9196,4.9973;-4.3267,-3.7893,4.9784;-2.2423,-3.2533,6.2389;1.4147,-3.8944,-.6253;2.1714,-3.3908,-1.0794;.5231,.2419,-4.7152;-3.0789,-1.723,.0215;-2.9045,-.9701,1.182;-1.8425,-.3195,1.5151;-.3676,.5538,1.2184;-.4437,1.4527,-.4084;.9847,-.7016,1.3974;-.3563,1.747,2.6625;-3.8804,-.9582,2.0789;-3.6528,-.3412,3.3366;-.2096,.7608,-1.2364;.3325,2.2395,-.4051;-1.422,1.9416,-.5675;1.0145,-1.0651,2.4378;1.9565,-.2381,1.158;.8599,-1.5441,.6977;-.414,1.2085,3.6253;.58,2.3342,2.6613;-1.198,2.4604,2.6112;-2.7912,-.7963,3.8511;-4.5684,-.5135,3.9183;-3.4823,.7406,3.2137;4.8415,-.7125,.9876;4.4138,-2.0386,.8472;3.7615,-2.6855,1.8896;3.5541,-1.9932,3.0793;4.0343,-.7021,3.2761;4.6865,-.0688,2.2228;4.517,-2.5352,-.1194;3.3633,-3.6933,1.7643;2.691,-2.5925,4.102;3.8526,-.193,4.2229;5.0308,.9623,2.3396;-.7943,.4624,-4.2909;-1.774,-.5058,-4.4674;-1.4262,-1.6983,-5.0907;-.1398,-1.9295,-5.569;.8331,-.9579,-5.3696;-1.0392,1.3864,-3.7608;-2.7923,-.3592,-4.1069;-2.4379,-2.7476,-5.2288;.0908,-2.8706,-6.0684;1.8549,-1.1441,-5.7046;2.359,-1.8974,5.042;2.3143,-3.7343,3.9333;-2.2149,-3.65,-6.0071;-3.4399,-2.6621,-4.5463;7.0712,1.1641,-1.4892;6.1108,1.5542,-2.4675;8.4397,1.4958,-1.6851;8.8497,2.165,-2.8121;9.1657,1.1969,-.9227;9.9058,2.4092,-2.9547;6.571,2.2274,-3.6333;7.9024,2.5243,-3.8008;5.8501,2.5007,-4.4074;8.2338,3.0361,-4.7087;3.4005,3.1514,-3.3293;2.2857,3.5634,-4.1175;4.2052,4.1627,-2.7322;3.9521,5.4958,-2.9535;5.0328,3.8744,-2.0822;4.586,6.2523,-2.4811;2.0589,4.9493,-4.3412;2.8767,5.8985,-3.7803;1.2081,5.2465,-4.9622;2.6912,6.9616,-3.9562;-4.4772,-2.2004,-.2981;-4.448,-2.9935,-1.065;-5.0064,-2.5818,.5902;-5.0915,-1.3804,-.7163;-2.1737,-1.4274,-1.1477;-2.3087,-.3862,-1.4952;-1.0978,-1.5537,-.941;-2.4138,-2.0812,-1.9993;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414309399</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002805968437 0.000393190166 0.017054856395 0.005334053175</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030506800 -0.001406729 -0.000152565 0.000116552 0.000277278 0.000385869 0.000407949 0.000488662 0.000607005 0.000787697 0.000921895 0.001109697 0.001258769 0.001265882 0.001374584 0.001394010 0.001614158 0.001723725 0.001801128 0.001958818 0.002133069 0.002470793 0.002553354 0.002686658 0.002821551 0.003129662 0.003237974 0.003419024 0.003849415 0.003939805 0.004332480 0.004690549 0.004803666 0.004971274 0.005816742 0.006046044 0.006185567 0.006538656 0.006783520 0.007487988 0.007879378 0.008098263 0.009082036 0.009419408 0.009837477 0.010702724 0.011072898 0.011534696 0.011681903 0.011981420 0.012819200 0.013137014 0.013862599 0.014352453 0.014910293 0.015288150 0.015585114 0.015840874 0.015962435 0.016814687 0.017265371 0.017644168 0.018794622 0.019299668 0.019630948 0.020507823 0.021150174 0.021306006 0.022305406 0.023070699 0.024894606 0.025878663 0.026545560 0.026804179 0.027159224 0.028890508 0.029321757 0.031398570 0.032982058 0.033282449 0.033656838 0.035335200 0.035688737 0.037263140 0.039179722 0.039697154 0.040508621 0.041629241 0.042051457 0.044373388 0.045152207 0.046314065 0.047160211 0.049137881 0.050244473 0.050677478 0.050976828 0.051186394 0.052468885 0.052499801 0.052833987 0.052916297 0.054363738 0.054646236 0.055431706 0.056028578 0.056427577 0.056496950 0.056961872 0.058264859 0.060236346 0.060544300 0.061410397 0.061859004 0.062900719 0.064131430 0.064967705 0.065579046 0.066269784 0.067559792 0.068766508 0.070037547 0.072530274 0.074215411 0.074351263 0.076072532 0.077522446 0.083295669 0.084769202 0.086707777 0.086988662 0.087628638 0.090268864 0.090727782 0.092931214 0.094574563 0.095186797 0.096292113 0.097132696 0.097708005 0.098697817 0.099472740 0.100147564 0.102276757 0.102634384 0.103028945 0.103332409 0.103892104 0.104710121 0.106700381 0.107302895 0.108352911 0.108976024 0.110186428 0.111820932 0.112302213 0.113103388 0.114734641 0.116098216 0.118811113 0.120550151 0.121238705 0.122169735 0.123840310 0.125197131 0.126214146 0.126824597 0.131639843 0.134836872 0.135525990 0.142400212 0.143421115 0.146789796 0.147124360 0.149593691 0.151854987 0.154457775 0.155574783 0.156586421 0.160860357 0.161645848 0.173228035 0.173725781 0.178948693 0.183896396 0.184926699 0.188884667 0.189958354 0.193796792 0.193862205 0.198237923 0.199995727 0.204869317 0.206759436 0.207078167 0.209720818 0.211256030 0.215174965 0.217208997 0.217618807 0.220377580 0.224833426 0.226198959 0.231754416 0.234738996 0.235336461 0.235613621 0.244442410 0.255685509 0.256983274 0.262699383 0.269547483 0.279765704 0.282857482 0.286137621 0.291300300 0.295763939 0.304157108 0.305471606 0.307080771 0.313178208 0.316211179 0.316691358 0.321883108 0.329142019 0.332154235 0.350088525 0.351789645 0.354624704 0.355365949 0.359811465 0.362621753 0.363101100 0.383347408 0.385679906 0.391539735 0.410378393 0.425217029 0.429726289 0.455924517 0.468492096 0.474146149 0.481597187 0.482665852 0.486804086 0.490144861 0.508450687 0.514670394 0.534899652 0.566016049 0.572666597 0.591746064 0.593388776 0.606227501 0.607394990 0.644103458 0.646212241 0.648066349 0.674157333 0.677300860 0.684803429 0.691360653 0.692936918 0.699298187 0.704110466 0.716838599 0.741172908 0.751155337 0.758254424 0.765294965 0.772233061 0.778721866 0.810408600 0.812555749 0.816298375 0.821558294 0.821885049 0.828551321 0.831248432 0.835490877 0.836587950 0.845093055 0.845688686 0.848075405 0.858108315 0.864485772 0.865314460 0.873085577 0.880907425 0.884253456 0.889271409 0.891801307 0.900514320 0.903722798 0.920341659 0.923302359 0.932974198 0.935032336 0.964811573 0.975619649 0.985602860 1.000905944 1.017253653 1.027022136 1.041239223 1.050101472 1.057202436 1.067715800 1.086510621 1.088412296 1.103417298 1.106129448 1.112193705 1.119450032 1.123409101 1.135327048 1.142540103 1.173029600 1.173906455 1.180789656 1.186140344 1.189648275 1.195746018 1.223554978 1.227085776 1.274225957 1.300913300 1.318908707 1.327734186 1.332579001 1.333924954 1.335625780 1.340288598 1.342616315 1.344872441 1.358442904 1.376729592 1.382800816 1.383879985 1.408614927 1.419493692 1.433437526 1.551393836 1.668206782 1.774605326</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">164</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34080069" y3="0.04902108" z3="-0.19648377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38688408" y3="0.16376016" z3="0.41358039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64780976" y3="0.43944792" z3="-0.34503387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73009294" y3="1.23823888" z3="-2.26410918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38928943" y3="0.43491929" z3="-1.18815847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73292468" y3="0.84832215" z3="-3.66749485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63626519" y3="1.75098524" z3="-3.13767048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38614715" y3="2.59306954" z3="-4.62198703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56618607" y3="1.25217101" z3="-4.38180455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50732412" y3="2.92908474" z3="-5.18103149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9286689" y3="-0.48200995" z3="-3.44670883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09892294" y3="0.04549437" z3="-1.00620101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3997787" y3="-1.09477941" z3="-2.00805612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92850785" y3="-0.95907667" z3="-1.83698618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09733436" y3="-2.42185526" z3="-1.85409287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14549448" y3="-3.62217523" z3="0.67912878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03131934" y3="-5.25031141" z3="-4.74100068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25645179" y3="-4.99713961" z3="-3.70150194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84672854" y3="-4.31629862" z3="-1.07833555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7695953" y3="-4.58319876" z3="-2.85374477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56983054" y3="-5.09700637" z3="-3.23773049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86570913" y3="-4.75164588" z3="-1.92146554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48619332" y3="-4.2568316" z3="-1.52593496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80018566" y3="-4.49437597" z3="-3.20584742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37026398" y3="-5.41383668" z3="-3.91039787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90020707" y3="-4.79847172" z3="-1.57296666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03401856" y3="-3.86864413" z3="0.24299582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1736465" y3="-3.65144251" z3="0.88805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06264966" y3="-4.11428297" z3="0.45685946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16632008" y3="-3.51240965" z3="2.35481924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2207505" y3="-3.3167269" z3="5.15201143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36181714" y3="-3.71395706" z3="3.0603094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99802356" y3="-3.21939559" z3="3.07404938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02245718" y3="-3.12227739" z3="4.46231528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38834771" y3="-3.61798475" z3="4.44883035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27979599" y3="-3.95268234" z3="2.51359826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04077636" y3="-3.08567418" z3="2.56786673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09436101" y3="-2.91175629" z3="4.9986243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32731896" y3="-3.78403563" z3="4.98578854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24053388" y3="-3.24707269" z3="6.24306474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40554026" y3="-3.88414899" z3="-0.62595683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16667609" y3="-3.38450043" z3="-1.08255775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52690288" y3="0.2459088" z3="-4.71927503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07667851" y3="-1.72751031" z3="0.02280251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90779319" y3="-0.97456711" z3="1.18397122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84940971" y3="-0.32234367" z3="1.5222844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37247737" y3="0.55007742" z3="1.22562518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4524585" y3="1.45537379" z3="-0.39728501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98120421" y3="-0.70563517" z3="1.39713882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35985782" y3="1.73610629" z3="2.67582227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88746981" y3="-0.96404279" z3="2.07646995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66732687" y3="-0.34437393" z3="3.33366797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20837249" y3="0.76994076" z3="-1.22610049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32022798" y3="2.24800149" z3="-0.38844144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43349897" y3="1.93454239" z3="-0.55824708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0148968" y3="-1.07055463" z3="2.43727706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95380797" y3="-0.24267388" z3="1.15482218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85484254" y3="-1.5482536" z3="0.69810302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4172674" y3="1.19201446" z3="3.63516268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57641192" y3="2.32349514" z3="2.67820152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20204957" y3="2.44915974" z3="2.62829444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80742743" y3="-0.79692183" z3="3.85300874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5853085" y3="-0.51746814" z3="3.91074222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49741948" y3="0.7378007" z3="3.2097878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84097089" y3="-0.70955082" z3="0.98504748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41283327" y3="-2.03571911" z3="0.84394451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76057645" y3="-2.68304917" z3="1.8859663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55285918" y3="-1.9911509" z3="3.07528836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03391658" y3="-0.70005505" z3="3.27321213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6860934" y3="-0.06628661" z3="2.22027978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51638601" y3="-2.53209522" z3="-0.12231411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36289714" y3="-3.69094808" z3="1.76089565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69166247" y3="-2.59127434" z3="4.09924215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85357902" y3="-0.19160147" z3="4.22123178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03108482" y3="0.96481155" z3="2.33784815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78892252" y3="0.46468004" z3="-4.29083644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7677957" y3="-0.50447599" z3="-4.46585383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41993039" y3="-1.69584972" z3="-5.09266089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13488898" y3="-1.92472527" z3="-5.5739379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83691264" y3="-0.95259737" z3="-5.37762844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03311846" y3="1.38746373" z3="-3.75795286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78566499" y3="-0.36036973" z3="-4.10218384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43075117" y3="-2.74727104" z3="-5.22942295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09516432" y3="-2.86475987" z3="-6.07637064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85801067" y3="-1.13697557" z3="-5.71537489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36211353" y3="-1.89727845" z3="5.04215029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31720076" y3="-3.7325762" z3="3.93191181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20831735" y3="-3.64942102" z3="-6.00826322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43099877" y3="-2.66265881" z3="-4.5454128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07306426" y3="1.16329455" z3="-1.49206488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11321655" y3="1.55504954" z3="-2.4702769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.442194" y3="1.49230578" z3="-1.68816861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85330489" y3="2.16067537" z3="-2.81525882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16774492" y3="1.19173731" z3="-0.92596897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9101603" y3="2.4034751" z3="-2.95790555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57467533" y3="2.22791459" z3="-3.63600669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90654085" y3="2.522081" z3="-3.80359757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85417631" y3="2.50244244" z3="-4.4099783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2387961" y3="3.0337476" z3="-4.71141371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40452373" y3="3.15489322" z3="-3.33376604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29058018" y3="3.56702096" z3="-4.12312222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20950812" y3="4.16599016" z3="-2.73674323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95755543" y3="5.49887054" z3="-2.95896424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03709974" y3="3.87702814" z3="-2.08693696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59251526" y3="6.25408911" z3="-2.48799516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06430519" y3="4.95335823" z3="-4.34680186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88229809" y3="5.90240158" z3="-3.78573246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21391061" y3="5.25103625" z3="-4.96810059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.696919" y3="6.96584102" z3="-3.9618218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4735837" y3="-2.20471956" z3="-0.3035693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43974126" y3="-2.99572921" z3="-1.07152839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00678568" y3="-2.58834977" z3="0.58096421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08609571" y3="-1.38422068" z3="-0.72322932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16685959" y3="-1.43214236" z3="-1.14338718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30181862" y3="-0.39234942" z3="-1.49258135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09137078" y3="-1.55714421" z3="-0.93355333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40382727" y3="-2.08678194" z3="-1.99580142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,.049,-.1965;7.3869,.1638,.4136;6.6478,.4394,-.345;4.7301,1.2382,-2.2641;4.3893,.4349,-1.1882;2.7329,.8483,-3.6675;3.6363,1.751,-3.1377;1.3861,2.5931,-4.622;1.5662,1.2522,-4.3818;.5073,2.9291,-5.181;2.9287,-.482,-3.4467;3.0989,.0455,-1.0062;2.3998,-1.0948,-2.0081;.9285,-.9591,-1.837;3.0973,-2.4219,-1.8541;-.1455,-3.6222,.6791;-.0313,-5.2503,-4.741;-.2565,-4.9971,-3.7015;-.8467,-4.3163,-1.0783;.7696,-4.5832,-2.8537;-1.5698,-5.097,-3.2377;-1.8657,-4.7516,-1.9215;.4862,-4.2568,-1.5259;1.8002,-4.4944,-3.2058;-2.3703,-5.4138,-3.9104;-2.9002,-4.7985,-1.573;-1.034,-3.8686,.243;-2.1736,-3.6514,.8881;-3.0626,-4.1143,.4569;-2.1663,-3.5124,2.3548;-2.2208,-3.3167,5.152;-3.3618,-3.714,3.0603;-.998,-3.2194,3.074;-1.0225,-3.1223,4.4623;-3.3883,-3.618,4.4488;-4.2798,-3.9527,2.5136;-.0408,-3.0857,2.5679;-.0944,-2.9118,4.9986;-4.3273,-3.784,4.9858;-2.2405,-3.2471,6.2431;1.4055,-3.8841,-.626;2.1667,-3.3845,-1.0826;.5269,.2459,-4.7193;-3.0767,-1.7275,.0228;-2.9078,-.9746,1.184;-1.8494,-.3223,1.5223;-.3725,.5501,1.2256;-.4525,1.4554,-.3973;.9812,-.7056,1.3971;-.3599,1.7361,2.6758;-3.8875,-.964,2.0765;-3.6673,-.3444,3.3337;-.2084,.7699,-1.2261;.3202,2.248,-.3884;-1.4335,1.9345,-.5582;1.0149,-1.0706,2.4373;1.9538,-.2427,1.1548;.8548,-1.5483,.6981;-.4173,1.192,3.6352;.5764,2.3235,2.6782;-1.202,2.4492,2.6283;-2.8074,-.7969,3.853;-4.5853,-.5175,3.9107;-3.4974,.7378,3.2098;4.841,-.7096,.985;4.4128,-2.0357,.8439;3.7606,-2.683,1.886;3.5529,-1.9912,3.0753;4.0339,-.7001,3.2732;4.6861,-.0663,2.2203;4.5164,-2.5321,-.1223;3.3629,-3.6909,1.7609;2.6917,-2.5913,4.0992;3.8536,-.1916,4.2212;5.0311,.9648,2.3378;-.7889,.4647,-4.2908;-1.7678,-.5045,-4.4659;-1.4199,-1.6958,-5.0927;-.1349,-1.9247,-5.5739;.8369,-.9526,-5.3776;-1.0331,1.3875,-3.758;-2.7857,-.3604,-4.1022;-2.4308,-2.7473,-5.2294;.0952,-2.8648,-6.0764;1.858,-1.137,-5.7154;2.3621,-1.8973,5.0422;2.3172,-3.7326,3.9319;-2.2083,-3.6494,-6.0083;-3.431,-2.6627,-4.5454;7.0731,1.1633,-1.4921;6.1132,1.555,-2.4703;8.4422,1.4923,-1.6882;8.8533,2.1607,-2.8153;9.1677,1.1917,-.926;9.9102,2.4035,-2.9579;6.5747,2.2279,-3.636;7.9065,2.5221,-3.8036;5.8542,2.5024,-4.41;8.2388,3.0337,-4.7114;3.4045,3.1549,-3.3338;2.2906,3.567,-4.1231;4.2095,4.166,-2.7367;3.9576,5.4989,-2.959;5.0371,3.877,-2.0869;4.5925,6.2541,-2.488;2.0643,4.9534,-4.3468;2.8823,5.9024,-3.7857;1.2139,5.251,-4.9681;2.6969,6.9658,-3.9618;-4.4736,-2.2047,-.3036;-4.4397,-2.9957,-1.0715;-5.0068,-2.5883,.581;-5.0861,-1.3842,-.7232;-2.1669,-1.4321,-1.1434;-2.3018,-.3923,-1.4926;-1.0914,-1.5571,-.9336;-2.4038,-2.0868,-1.9958;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650408544692</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002882216549 0.000422525744 0.019942410475 0.005330677644</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030507315 -0.000701572 -0.000120283 0.000116671 0.000278237 0.000385799 0.000410615 0.000493764 0.000607613 0.000787685 0.000922518 0.001110234 0.001259361 0.001267834 0.001374765 0.001395490 0.001620517 0.001725185 0.001801451 0.001961872 0.002132990 0.002475374 0.002553675 0.002687406 0.002821625 0.003129973 0.003249361 0.003419931 0.003852407 0.003941960 0.004333730 0.004690713 0.004803102 0.004980461 0.005816549 0.006049161 0.006185932 0.006538709 0.006783718 0.007487710 0.007881463 0.008097892 0.009083698 0.009435281 0.009837617 0.010704997 0.011094538 0.011534719 0.011681567 0.011985111 0.012819210 0.013165610 0.013868289 0.014367188 0.014910495 0.015290422 0.015585081 0.015842921 0.015965403 0.016825558 0.017265402 0.017653116 0.018799460 0.019307153 0.019638629 0.020509108 0.021150144 0.021306371 0.022305800 0.023071278 0.024894277 0.025878408 0.026545379 0.026807982 0.027171285 0.028893834 0.029322171 0.031398581 0.032982091 0.033284284 0.033661106 0.035335158 0.035731558 0.037262892 0.039217656 0.039735291 0.040509040 0.041716744 0.042251379 0.044381491 0.045152078 0.046375319 0.047199573 0.049138338 0.050244518 0.050683142 0.050977841 0.051187210 0.052468897 0.052500001 0.052837117 0.052920440 0.054369415 0.054647051 0.055440410 0.056050463 0.056429235 0.056497913 0.056963105 0.058282502 0.060242853 0.060549235 0.061411912 0.061867425 0.062931220 0.064143870 0.064971580 0.065612367 0.066271623 0.067564314 0.068782162 0.070045040 0.072532396 0.074223304 0.074361136 0.076074953 0.077543445 0.083299369 0.084803355 0.086729663 0.086989624 0.087651794 0.090274025 0.090731680 0.092933818 0.094574927 0.095187214 0.096292184 0.097177625 0.097717534 0.098698124 0.099477762 0.100149110 0.102276828 0.102653598 0.103046089 0.103332249 0.103894330 0.104713719 0.106705926 0.107304974 0.108468698 0.108988223 0.110190150 0.111862182 0.112306065 0.113113202 0.114744429 0.116098138 0.118812877 0.120551478 0.121245585 0.122169920 0.123865616 0.125197757 0.126214719 0.126838805 0.131644158 0.134838270 0.135529098 0.142415752 0.143423917 0.146790460 0.147124710 0.149596490 0.151888758 0.154460421 0.155576577 0.156588279 0.160888388 0.161645746 0.173228009 0.173732569 0.178987098 0.183896454 0.184926747 0.188884492 0.189958647 0.193798574 0.193869561 0.198243777 0.200002413 0.204872763 0.206759547 0.207078454 0.209732322 0.211272475 0.215175069 0.217209252 0.217627394 0.220388347 0.224839197 0.226200646 0.231754408 0.234758332 0.235336688 0.235618435 0.244442450 0.255685557 0.256985591 0.262707839 0.269568176 0.279795801 0.282857455 0.286139096 0.291318031 0.295770977 0.304159701 0.305474243 0.307086295 0.313178205 0.316211993 0.316709617 0.321888083 0.329145716 0.332181387 0.350127692 0.351792593 0.354650025 0.355383717 0.359813335 0.362626035 0.363101095 0.383379103 0.385718932 0.391541836 0.410383843 0.425217494 0.429741018 0.456804666 0.468502013 0.474146227 0.481611995 0.482721947 0.486808134 0.490179322 0.508454203 0.514681368 0.534908880 0.566016729 0.572667769 0.591746413 0.593391325 0.606230117 0.607404615 0.644166001 0.646269946 0.648145167 0.674168453 0.677307260 0.684817932 0.691369250 0.692969924 0.699320369 0.704120608 0.716842463 0.741173841 0.751155752 0.758264952 0.765539019 0.772242449 0.778724652 0.810410464 0.812559109 0.816344930 0.821559889 0.821964088 0.828887283 0.831250937 0.835512620 0.836625543 0.845093439 0.845728313 0.848095187 0.858172110 0.864485900 0.865336176 0.873087279 0.880913877 0.884255902 0.889272666 0.891801392 0.900530839 0.903724366 0.920342131 0.923302837 0.932999152 0.935032770 0.964850379 0.975619662 0.985606746 1.000907687 1.017272401 1.027069313 1.041240042 1.050150291 1.057222130 1.067737418 1.086510657 1.088418446 1.103446970 1.106130956 1.112193974 1.119460829 1.123413776 1.135379339 1.142574032 1.173777666 1.173928589 1.180789641 1.186153333 1.189648414 1.195745987 1.223560887 1.227111353 1.274225784 1.300925860 1.318925800 1.327735336 1.332581788 1.333933278 1.335627137 1.340293687 1.342617825 1.344872695 1.358445342 1.376819398 1.382802459 1.383887752 1.408676647 1.419508340 1.433682787 1.551404330 1.668734958 1.774635361</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">165</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34094431" y3="0.05242757" z3="-0.19827072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38712611" y3="0.16222601" z3="0.4109654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64867977" y3="0.4400862" z3="-0.34723771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73244876" y3="1.24201387" z3="-2.26645683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39017696" y3="0.44028907" z3="-1.1896977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73528283" y3="0.85272607" z3="-3.67010421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63959604" y3="1.75491908" z3="-3.14123276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39164415" y3="2.59780247" z3="-4.62899557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57002661" y3="1.25678547" z3="-4.38682668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51419738" y3="2.93266447" z3="-5.19105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92877875" y3="-0.47751644" z3="-3.44685749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0991688" y3="0.0534916" z3="-1.00715434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39780947" y3="-1.08670333" z3="-2.00751432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9267579" y3="-0.94779644" z3="-1.83749317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09225148" y3="-2.41507364" z3="-1.85115714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14708315" y3="-3.62959561" z3="0.68478886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03431486" y3="-5.23998323" z3="-4.74138099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25908772" y3="-4.99059855" z3="-3.70092305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84840326" y3="-4.31929023" z3="-1.07457908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76624492" y3="-4.57504997" z3="-2.85336559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57111313" y3="-5.09743644" z3="-3.2353036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86625657" y3="-4.75750709" z3="-1.91742793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48396538" y3="-4.25391414" z3="-1.52407262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79563785" y3="-4.48009129" z3="-3.20589907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37073271" y3="-5.41570022" z3="-3.90783186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89984083" y3="-4.81058337" z3="-1.56707878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03580383" y3="-3.87506184" z3="0.24799231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17595186" y3="-3.65615366" z3="0.89195867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06457698" y3="-4.11933876" z3="0.46094893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17029366" y3="-3.51471858" z3="2.3584177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22593022" y3="-3.31616767" z3="5.15538622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36590633" y3="-3.71631298" z3="3.06366974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00255427" y3="-3.21988541" z3="3.07778293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02774357" y3="-3.1208559" z3="4.46582069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3924151" y3="-3.61991778" z3="4.45220808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28015762" y3="-3.96041038" z3="2.5174866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04194851" y3="-3.09134303" z3="2.57169979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0964801" y3="-2.91351094" z3="5.00249783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32872091" y3="-3.79066484" z3="4.98904315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24428731" y3="-3.2481054" z3="6.24679647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40587622" y3="-3.88206906" z3="-0.62423402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16167206" y3="-3.37733801" z3="-1.07981874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.529971" y3="0.25078685" z3="-4.72390714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0764872" y3="-1.73360122" z3="0.0240843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91081553" y3="-0.98052197" z3="1.18604531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85113251" y3="-0.33015353" z3="1.52775496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37722201" y3="0.54517277" z3="1.23355457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46100825" y3="1.4558895" z3="-0.38638079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97881992" y3="-0.70805107" z3="1.39638866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36115123" y3="1.72421679" z3="2.68916449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89351695" y3="-0.96930746" z3="2.07537694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67814023" y3="-0.3493117" z3="3.33320795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21536064" y3="0.77243072" z3="-1.21826893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30448414" y3="2.25353533" z3="-0.37589586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44549363" y3="1.93223951" z3="-0.54491123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01717847" y3="-1.07649723" z3="2.43488881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94718831" y3="-0.2399661" z3="1.15297877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85276865" y3="-1.54765175" z3="0.69384799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41631798" y3="1.17517005" z3="3.64589502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57565095" y3="2.31080022" z3="2.69188582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20280483" y3="2.43848349" z3="2.64823685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81980011" y3="-0.80111515" z3="3.85576473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5981471" y3="-0.52301587" z3="3.90706307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50933339" y3="0.73294296" z3="3.20949999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84003394" y3="-0.70571623" z3="0.98314222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41354636" y3="-2.03237746" z3="0.8426266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76156927" y3="-2.67982593" z3="1.88482532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55317912" y3="-1.98767999" z3="3.07430827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03136587" y3="-0.69571264" z3="3.27081552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68322698" y3="-0.06179533" z3="2.21778793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51785402" y3="-2.52908925" z3="-0.12361528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3647382" y3="-3.68813599" z3="1.759744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69130656" y3="-2.58806186" z3="4.09753526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84895524" y3="-0.18678119" z3="4.21772048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02657012" y3="0.96976516" z3="2.33459723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78571461" y3="0.46822029" z3="-4.29237067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76438716" y3="-0.50170674" z3="-4.46461118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41749641" y3="-1.6927896" z3="-5.09069365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13297937" y3="-1.92038357" z3="-5.57626931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83884952" y3="-0.94725991" z3="-5.38159338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02927676" y3="1.39088211" z3="-3.75965219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78134267" y3="-0.35803456" z3="-4.09843388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.427763" y3="-2.74440595" z3="-5.22468135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09672292" y3="-2.86020532" z3="-6.07778007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85925052" y3="-1.13084603" z3="-5.72253876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36099438" y3="-1.89426237" z3="5.03919544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31415334" y3="-3.72939125" z3="3.92793445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20620731" y3="-3.6466305" z3="-6.00384644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42713562" y3="-2.6606843" z3="-4.53842265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07523607" y3="1.16307803" z3="-1.49454521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11608072" y3="1.55570161" z3="-2.47308824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44500561" y3="1.48967026" z3="-1.69088873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85736169" y3="2.15567676" z3="-2.81889131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17011003" y3="1.18926675" z3="-0.9281454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91454081" y3="2.39586866" z3="-2.96195222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57876892" y3="2.22574056" z3="-3.63981334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91120749" y3="2.51683428" z3="-3.80792417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85892797" y3="2.50068512" z3="-4.41420369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24434213" y3="3.02540436" z3="-4.71679996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41006551" y3="3.15860925" z3="-3.34034947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29717373" y3="3.57109176" z3="-4.13106438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21651008" y3="4.16939362" z3="-2.74481654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96663942" y3="5.50235575" z3="-2.96925638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04329373" y3="3.88028831" z3="-2.09407805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60206534" y3="6.25816012" z3="-2.49838527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07349213" y3="4.95700995" z3="-4.35759919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89238345" y3="5.90589486" z3="-3.79726107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22395495" y3="5.25469273" z3="-4.98004345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70886576" y3="6.96917951" z3="-3.97509204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47206826" y3="-2.21141945" z3="-0.30597536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43593326" y3="-3.00205254" z3="-1.0746007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00698716" y3="-2.59586544" z3="0.57759011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0840273" y3="-1.39097536" z3="-0.72637554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16399437" y3="-1.43710286" z3="-1.13938038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29804672" y3="-0.3962074" z3="-1.48824211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08938719" y3="-1.56090538" z3="-0.92604518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.39694451" y3="-2.09171169" z3="-1.99230947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3409,.0524,-.1983;7.3871,.1622,.411;6.6487,.4401,-.3472;4.7324,1.242,-2.2665;4.3902,.4403,-1.1897;2.7353,.8527,-3.6701;3.6396,1.7549,-3.1412;1.3916,2.5978,-4.629;1.57,1.2568,-4.3868;.5142,2.9327,-5.191;2.9288,-.4775,-3.4469;3.0992,.0535,-1.0072;2.3978,-1.0867,-2.0075;.9268,-.9478,-1.8375;3.0923,-2.4151,-1.8512;-.1471,-3.6296,.6848;-.0343,-5.24,-4.7414;-.2591,-4.9906,-3.7009;-.8484,-4.3193,-1.0746;.7662,-4.575,-2.8534;-1.5711,-5.0974,-3.2353;-1.8663,-4.7575,-1.9174;.484,-4.2539,-1.5241;1.7956,-4.4801,-3.2059;-2.3707,-5.4157,-3.9078;-2.8998,-4.8106,-1.5671;-1.0358,-3.8751,.248;-2.176,-3.6562,.892;-3.0646,-4.1193,.4609;-2.1703,-3.5147,2.3584;-2.2259,-3.3162,5.1554;-3.3659,-3.7163,3.0637;-1.0026,-3.2199,3.0778;-1.0277,-3.1209,4.4658;-3.3924,-3.6199,4.4522;-4.2802,-3.9604,2.5175;-.0419,-3.0913,2.5717;-.0965,-2.9135,5.0025;-4.3287,-3.7907,4.989;-2.2443,-3.2481,6.2468;1.4059,-3.8821,-.6242;2.1617,-3.3773,-1.0798;.53,.2508,-4.7239;-3.0765,-1.7336,.0241;-2.9108,-.9805,1.186;-1.8511,-.3302,1.5278;-.3772,.5452,1.2336;-.461,1.4559,-.3864;.9788,-.7081,1.3964;-.3612,1.7242,2.6892;-3.8935,-.9693,2.0754;-3.6781,-.3493,3.3332;-.2154,.7724,-1.2183;.3045,2.2535,-.3759;-1.4455,1.9322,-.5449;1.0172,-1.0765,2.4349;1.9472,-.24,1.153;.8528,-1.5477,.6938;-.4163,1.1752,3.6459;.5757,2.3108,2.6919;-1.2028,2.4385,2.6482;-2.8198,-.8011,3.8558;-4.5981,-.523,3.9071;-3.5093,.7329,3.2095;4.84,-.7057,.9831;4.4135,-2.0324,.8426;3.7616,-2.6798,1.8848;3.5532,-1.9877,3.0743;4.0314,-.6957,3.2708;4.6832,-.0618,2.2178;4.5179,-2.5291,-.1236;3.3647,-3.6881,1.7597;2.6913,-2.5881,4.0975;3.849,-.1868,4.2177;5.0266,.9698,2.3346;-.7857,.4682,-4.2924;-1.7644,-.5017,-4.4646;-1.4175,-1.6928,-5.0907;-.133,-1.9204,-5.5763;.8388,-.9473,-5.3816;-1.0293,1.3909,-3.7597;-2.7813,-.358,-4.0984;-2.4278,-2.7444,-5.2247;.0967,-2.8602,-6.0778;1.8593,-1.1308,-5.7225;2.361,-1.8943,5.0392;2.3142,-3.7294,3.9279;-2.2062,-3.6466,-6.0038;-3.4271,-2.6607,-4.5384;7.0752,1.1631,-1.4945;6.1161,1.5557,-2.4731;8.445,1.4897,-1.6909;8.8574,2.1557,-2.8189;9.1701,1.1893,-.9281;9.9145,2.3959,-2.962;6.5788,2.2257,-3.6398;7.9112,2.5168,-3.8079;5.8589,2.5007,-4.4142;8.2443,3.0254,-4.7168;3.4101,3.1586,-3.3403;2.2972,3.5711,-4.1311;4.2165,4.1694,-2.7448;3.9666,5.5024,-2.9693;5.0433,3.8803,-2.0941;4.6021,6.2582,-2.4984;2.0735,4.957,-4.3576;2.8924,5.9059,-3.7973;1.224,5.2547,-4.98;2.7089,6.9692,-3.9751;-4.4721,-2.2114,-.306;-4.4359,-3.0021,-1.0746;-5.007,-2.5959,.5776;-5.084,-1.391,-.7264;-2.164,-1.4371,-1.1394;-2.298,-.3962,-1.4882;-1.0894,-1.5609,-.926;-2.3969,-2.0917,-1.9923;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650409528296</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002410965121 0.000331363417 0.022021707071 0.005344028183</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030508056 -0.000740199 -0.000025773 0.000116630 0.000278855 0.000386451 0.000411240 0.000492375 0.000607555 0.000788084 0.000926559 0.001111895 0.001259052 0.001269100 0.001374856 0.001395276 0.001619962 0.001727146 0.001801620 0.001963522 0.002132953 0.002478217 0.002555563 0.002692054 0.002823833 0.003130242 0.003262006 0.003420949 0.003855301 0.003945135 0.004334212 0.004695580 0.004802976 0.005002174 0.005817197 0.006050565 0.006190399 0.006538955 0.006783790 0.007487581 0.007882608 0.008098104 0.009086838 0.009442590 0.009838868 0.010708518 0.011111358 0.011534831 0.011683376 0.011988753 0.012819966 0.013177273 0.013882077 0.014376613 0.014912671 0.015294932 0.015585190 0.015845294 0.015969208 0.016829500 0.017266194 0.017652937 0.018807164 0.019311848 0.019641864 0.020509083 0.021150543 0.021309513 0.022306399 0.023073338 0.024896291 0.025879823 0.026546928 0.026813147 0.027188400 0.028895049 0.029323131 0.031398696 0.032982226 0.033285501 0.033665777 0.035336282 0.035758544 0.037266576 0.039241658 0.039750382 0.040509300 0.041745844 0.042407347 0.044381490 0.045152189 0.046460476 0.047249432 0.049138510 0.050244599 0.050688629 0.050978641 0.051187236 0.052468896 0.052500250 0.052839389 0.052921799 0.054369006 0.054647554 0.055443134 0.056066154 0.056432785 0.056498259 0.056963053 0.058289501 0.060246314 0.060554935 0.061414736 0.061868604 0.062943404 0.064145715 0.064975646 0.065626597 0.066271789 0.067573705 0.068781564 0.070052486 0.072533773 0.074236058 0.074365754 0.076074790 0.077568359 0.083301436 0.084827398 0.086755232 0.086989577 0.087669091 0.090279214 0.090733479 0.092934552 0.094575077 0.095187725 0.096292288 0.097200616 0.097721999 0.098698372 0.099486820 0.100149041 0.102276897 0.102674089 0.103062983 0.103333446 0.103895817 0.104717339 0.106709762 0.107306206 0.108551345 0.109013754 0.110191884 0.111877120 0.112309093 0.113122723 0.114765124 0.116098440 0.118815439 0.120553174 0.121249153 0.122170425 0.123881160 0.125198958 0.126215021 0.126844355 0.131648607 0.134838689 0.135529079 0.142421143 0.143424043 0.146790910 0.147125700 0.149597965 0.151909884 0.154460903 0.155580083 0.156589268 0.160914244 0.161651833 0.173228143 0.173736667 0.179000195 0.183896603 0.184926798 0.188886115 0.189959038 0.193800726 0.193870858 0.198248429 0.200011606 0.204878592 0.206760222 0.207079475 0.209737483 0.211276328 0.215175139 0.217209923 0.217632415 0.220393897 0.224849015 0.226201450 0.231756188 0.234777558 0.235336914 0.235619823 0.244442794 0.255685616 0.256990667 0.262714521 0.269576474 0.279812498 0.282857734 0.286140668 0.291327529 0.295775173 0.304161643 0.305477134 0.307090282 0.313178243 0.316215182 0.316720106 0.321891293 0.329147360 0.332204889 0.350156403 0.351792699 0.354656455 0.355399165 0.359814021 0.362634903 0.363102620 0.383399985 0.385765047 0.391542687 0.410383727 0.425218862 0.429752573 0.457295191 0.468511121 0.474147361 0.481612367 0.482749431 0.486809729 0.490223484 0.508457863 0.514686544 0.534913745 0.566016690 0.572668080 0.591746366 0.593393572 0.606232698 0.607415821 0.644170035 0.646304386 0.648214437 0.674172103 0.677312264 0.684818369 0.691371081 0.693011679 0.699322370 0.704124461 0.716845186 0.741174528 0.751155848 0.758271195 0.765742719 0.772253060 0.778724636 0.810411081 0.812559486 0.816353061 0.821561413 0.822076357 0.829109673 0.831251052 0.835524112 0.836636980 0.845097709 0.845791989 0.848105627 0.858201495 0.864487042 0.865349851 0.873087481 0.880914711 0.884255879 0.889273576 0.891803416 0.900537597 0.903724363 0.920342448 0.923304029 0.933014009 0.935032801 0.964858879 0.975620005 0.985610824 1.000909143 1.017309639 1.027115370 1.041240150 1.050164072 1.057238374 1.067765192 1.086510917 1.088422203 1.103458977 1.106132529 1.112194040 1.119464399 1.123415634 1.135413052 1.142627019 1.173898259 1.174303496 1.180790457 1.186168735 1.189660356 1.195749550 1.223561797 1.227127857 1.274228991 1.300929048 1.318934025 1.327747938 1.332581861 1.333950095 1.335627557 1.340299080 1.342619422 1.344872728 1.358452139 1.376857969 1.382804041 1.383896600 1.408786248 1.419521710 1.433833580 1.551413249 1.669006284 1.774637417</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">166</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3409471" y3="0.05672394" z3="-0.1982272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38765624" y3="0.16571122" z3="0.41133341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64937089" y3="0.44264968" z3="-0.34759964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73420024" y3="1.24293621" z3="-2.26878668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39056658" y3="0.44423653" z3="-1.19025847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73626041" y3="0.85454452" z3="-3.67137326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64259719" y3="1.7560711" z3="-3.14492633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39630202" y3="2.59999074" z3="-4.63457487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57156604" y3="1.25940095" z3="-4.38837744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51925931" y3="2.93656343" z3="-5.19597622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92700603" y3="-0.47542639" z3="-3.44524694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09886722" y3="0.06014603" z3="-1.00668425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39672396" y3="-1.08168304" z3="-2.0045255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92584957" y3="-0.94248139" z3="-1.83372364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09197714" y3="-2.40953009" z3="-1.84663962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1478447" y3="-3.63026059" z3="0.68687364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02638566" y3="-5.23325184" z3="-4.74085041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25270452" y3="-4.98555699" z3="-3.70027178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84571146" y3="-4.31911711" z3="-1.07403381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77117265" y3="-4.56931939" z3="-2.85130636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56514315" y3="-5.0948875" z3="-3.23639344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86249029" y3="-4.7570021" z3="-1.91843131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48667242" y3="-4.25016096" z3="-1.52195349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8009445" y3="-4.47322157" z3="-3.20351159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36344323" y3="-5.41390845" z3="-3.91006028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89687233" y3="-4.81089907" z3="-1.56919166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03517979" y3="-3.87717342" z3="0.24897218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17597052" y3="-3.66130755" z3="0.89235719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06399082" y3="-4.12410119" z3="0.45930911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17113851" y3="-3.52299048" z3="2.3591577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23023169" y3="-3.32660203" z3="5.1561797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3673231" y3="-3.7262083" z3="3.06293885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00423421" y3="-3.22822469" z3="3.08010561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.030802" y3="-3.13095982" z3="4.46827172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39619982" y3="-3.62986598" z3="4.45133894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28315296" y3="-3.96745059" z3="2.51519631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04579883" y3="-3.09371562" z3="2.57560874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1025777" y3="-2.92004096" z3="5.00562721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33550809" y3="-3.79740083" z3="4.98696182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25167054" y3="-3.25703274" z3="6.2472066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40397352" y3="-3.87539974" z3="-0.62087423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16357736" y3="-3.37199004" z3="-1.07623905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52965798" y3="0.25456383" z3="-4.72192699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07853701" y3="-1.73729219" z3="0.02744006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91418814" y3="-0.98576401" z3="1.19019952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8578896" y3="-0.33247844" z3="1.53320876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3815378" y3="0.54161243" z3="1.23754072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46971686" y3="1.45722475" z3="-0.37932729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9744915" y3="-0.7134018" z3="1.39453356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36229972" y3="1.71676982" z3="2.69607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89671702" y3="-0.97788513" z3="2.07953466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.68182453" y3="-0.35842618" z3="3.33776255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22178315" y3="0.77797241" z3="-1.21244185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29539324" y3="2.25619523" z3="-0.36663779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45497572" y3="1.92984889" z3="-0.53640907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01399231" y3="-1.08363295" z3="2.43226727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94473439" y3="-0.24635632" z3="1.15061377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84680512" y3="-1.55216084" z3="0.69111696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41493629" y3="1.16546266" z3="3.65175341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57396302" y3="2.30367632" z3="2.69760863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20426006" y3="2.43045964" z3="2.65868967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.82238125" y3="-0.80894668" z3="3.85934392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.60113827" y3="-0.53415552" z3="3.91208052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51459102" y3="0.72418342" z3="3.21487595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83910334" y3="-0.70004707" z3="0.98381263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41560126" y3="-2.02785823" z3="0.84476661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7627115" y3="-2.67488108" z3="1.8866509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55000345" y3="-1.98107019" z3="3.0740469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02585154" y3="-0.6877727" z3="3.26988682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67854751" y3="-0.05429277" z3="2.21709901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52290004" y3="-2.52603695" z3="-0.12023082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36812805" y3="-3.68418995" z3="1.76259234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6873237" y3="-2.58141266" z3="4.09662789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84092695" y3="-0.1776201" z3="4.21592282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01963818" y3="0.97821045" z3="2.33294651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78445195" y3="0.47458111" z3="-4.28922685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76459978" y3="-0.49439142" z3="-4.46010644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41989301" y3="-1.68630845" z3="-5.08794354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13692133" y3="-1.91645045" z3="-5.5737541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8364216" y3="-0.94444898" z3="-5.38031264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02618466" y3="1.39795245" z3="-3.75622824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78077913" y3="-0.34912222" z3="-4.09276158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43195086" y3="-2.73660298" z3="-5.22026723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09108712" y3="-2.85682962" z3="-6.07682989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85609027" y3="-1.12972291" z3="-5.7219106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35498748" y3="-1.88696396" z3="5.03787481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31362725" y3="-3.72346493" z3="3.92896847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.212986" y3="-3.63884339" z3="-5.99991295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43003139" y3="-2.65094591" z3="-4.53302373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07698508" y3="1.16254763" z3="-1.49623981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11851422" y3="1.55419694" z3="-2.47584138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44714954" y3="1.48712449" z3="-1.69293112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86063941" y3="2.15117671" z3="-2.82191336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17156975" y3="1.18700318" z3="-0.92950562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91819805" y3="2.39050462" z3="-2.96496803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58250264" y3="2.22177139" z3="-3.6437924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91542324" y3="2.51198633" z3="-3.81188689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86318496" y3="2.49584672" z3="-4.41896422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24958267" y3="3.02012497" z3="-4.72132225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41635016" y3="3.15981817" z3="-3.34813004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30451048" y3="3.57250037" z3="-4.14023639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22498983" y3="4.17084324" z3="-2.75556936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97889709" y3="5.50360019" z3="-2.985068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05063206" y3="3.88205302" z3="-2.10326343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61646247" y3="6.25915383" z3="-2.51712905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08434214" y3="4.95846162" z3="-4.37142533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90613786" y3="5.90691776" z3="-3.81505856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23564337" y3="5.25641156" z3="-4.99487178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7256298" y3="6.97001435" z3="-3.99711375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47395554" y3="-2.21612899" z3="-0.30284916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4376515" y3="-3.00573153" z3="-1.07255327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00813469" y3="-2.60227667" z3="0.58012718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08711892" y3="-1.39573004" z3="-0.7218141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16694787" y3="-1.43795782" z3="-1.13601934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30377709" y3="-0.39782015" z3="-1.48425476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09181512" y3="-1.56038506" z3="-0.92369927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.39980945" y3="-2.09210066" z3="-1.989731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3409,.0567,-.1982;7.3877,.1657,.4113;6.6494,.4426,-.3476;4.7342,1.2429,-2.2688;4.3906,.4442,-1.1903;2.7363,.8545,-3.6714;3.6426,1.7561,-3.1449;1.3963,2.6,-4.6346;1.5716,1.2594,-4.3884;.5193,2.9366,-5.196;2.927,-.4754,-3.4452;3.0989,.0601,-1.0067;2.3967,-1.0817,-2.0045;.9258,-.9425,-1.8337;3.092,-2.4095,-1.8466;-.1478,-3.6303,.6869;-.0264,-5.2333,-4.7409;-.2527,-4.9856,-3.7003;-.8457,-4.3191,-1.074;.7712,-4.5693,-2.8513;-1.5651,-5.0949,-3.2364;-1.8625,-4.757,-1.9184;.4867,-4.2502,-1.522;1.8009,-4.4732,-3.2035;-2.3634,-5.4139,-3.9101;-2.8969,-4.8109,-1.5692;-1.0352,-3.8772,.249;-2.176,-3.6613,.8924;-3.064,-4.1241,.4593;-2.1711,-3.523,2.3592;-2.2302,-3.3266,5.1562;-3.3673,-3.7262,3.0629;-1.0042,-3.2282,3.0801;-1.0308,-3.131,4.4683;-3.3962,-3.6299,4.4513;-4.2832,-3.9675,2.5152;-.0458,-3.0937,2.5756;-.1026,-2.92,5.0056;-4.3355,-3.7974,4.987;-2.2517,-3.257,6.2472;1.404,-3.8754,-.6209;2.1636,-3.372,-1.0762;.5297,.2546,-4.7219;-3.0785,-1.7373,.0274;-2.9142,-.9858,1.1902;-1.8579,-.3325,1.5332;-.3815,.5416,1.2375;-.4697,1.4572,-.3793;.9745,-.7134,1.3945;-.3623,1.7168,2.6961;-3.8967,-.9779,2.0795;-3.6818,-.3584,3.3378;-.2218,.778,-1.2124;.2954,2.2562,-.3666;-1.455,1.9298,-.5364;1.014,-1.0836,2.4323;1.9447,-.2464,1.1506;.8468,-1.5522,.6911;-.4149,1.1655,3.6518;.574,2.3037,2.6976;-1.2043,2.4305,2.6587;-2.8224,-.8089,3.8593;-4.6011,-.5342,3.9121;-3.5146,.7242,3.2149;4.8391,-.7,.9838;4.4156,-2.0279,.8448;3.7627,-2.6749,1.8867;3.55,-1.9811,3.074;4.0259,-.6878,3.2699;4.6785,-.0543,2.2171;4.5229,-2.526,-.1202;3.3681,-3.6842,1.7626;2.6873,-2.5814,4.0966;3.8409,-.1776,4.2159;5.0196,.9782,2.3329;-.7845,.4746,-4.2892;-1.7646,-.4944,-4.4601;-1.4199,-1.6863,-5.0879;-.1369,-1.9165,-5.5738;.8364,-.9444,-5.3803;-1.0262,1.398,-3.7562;-2.7808,-.3491,-4.0928;-2.432,-2.7366,-5.2203;.0911,-2.8568,-6.0768;1.8561,-1.1297,-5.7219;2.355,-1.887,5.0379;2.3136,-3.7235,3.929;-2.213,-3.6388,-5.9999;-3.43,-2.6509,-4.533;7.077,1.1625,-1.4962;6.1185,1.5542,-2.4758;8.4471,1.4871,-1.6929;8.8606,2.1512,-2.8219;9.1716,1.187,-.9295;9.9182,2.3905,-2.965;6.5825,2.2218,-3.6438;7.9154,2.512,-3.8119;5.8632,2.4958,-4.419;8.2496,3.0201,-4.7213;3.4164,3.1598,-3.3481;2.3045,3.5725,-4.1402;4.225,4.1708,-2.7556;3.9789,5.5036,-2.9851;5.0506,3.8821,-2.1033;4.6165,6.2592,-2.5171;2.0843,4.9585,-4.3714;2.9061,5.9069,-3.8151;1.2356,5.2564,-4.9949;2.7256,6.97,-3.9971;-4.474,-2.2161,-.3028;-4.4377,-3.0057,-1.0726;-5.0081,-2.6023,.5801;-5.0871,-1.3957,-.7218;-2.1669,-1.438,-1.136;-2.3038,-.3978,-1.4843;-1.0918,-1.5604,-.9237;-2.3998,-2.0921,-1.9897;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411828956</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002291618776 0.000307941448 0.020513562379 0.005333630933</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030510120 -0.000507296 -0.000016682 0.000117217 0.000279347 0.000386993 0.000418608 0.000488919 0.000608458 0.000790321 0.000928809 0.001126512 0.001258261 0.001269270 0.001375282 0.001395340 0.001619940 0.001731549 0.001801873 0.001963760 0.002135210 0.002479841 0.002556965 0.002696877 0.002822570 0.003130714 0.003266637 0.003421185 0.003859816 0.003946052 0.004334340 0.004699817 0.004803048 0.005011922 0.005818347 0.006050245 0.006194395 0.006538897 0.006783872 0.007487602 0.007882501 0.008098271 0.009089622 0.009444064 0.009842554 0.010711237 0.011127719 0.011535190 0.011688634 0.011989295 0.012823741 0.013179785 0.013893289 0.014385637 0.014915367 0.015301135 0.015585382 0.015853895 0.015972659 0.016832223 0.017269036 0.017653944 0.018816015 0.019312436 0.019644899 0.020509507 0.021151265 0.021315071 0.022307089 0.023075671 0.024903629 0.025882366 0.026547236 0.026820947 0.027209719 0.028895488 0.029325758 0.031399107 0.032983361 0.033285674 0.033668792 0.035335787 0.035775910 0.037269060 0.039258493 0.039756246 0.040509343 0.041755943 0.042508710 0.044382110 0.045153892 0.046515343 0.047286888 0.049139041 0.050244731 0.050690984 0.050979338 0.051187242 0.052469048 0.052500726 0.052840688 0.052922440 0.054371225 0.054651536 0.055444595 0.056084060 0.056438382 0.056498665 0.056963343 0.058294695 0.060249568 0.060559376 0.061417262 0.061869317 0.062951437 0.064148877 0.064978305 0.065646255 0.066271919 0.067584139 0.068782314 0.070061189 0.072537423 0.074244034 0.074368541 0.076075221 0.077592936 0.083305767 0.084861802 0.086772299 0.086990902 0.087682755 0.090285134 0.090733530 0.092935943 0.094575537 0.095187810 0.096292444 0.097221308 0.097724628 0.098700047 0.099498024 0.100150589 0.102276969 0.102682262 0.103071301 0.103339153 0.103898654 0.104743997 0.106711361 0.107306775 0.108574873 0.109027961 0.110198524 0.111885596 0.112310947 0.113129020 0.114788438 0.116099655 0.118815117 0.120554911 0.121252893 0.122175972 0.123893556 0.125198926 0.126215331 0.126848066 0.131651928 0.134841084 0.135529472 0.142423149 0.143424847 0.146792205 0.147130204 0.149599243 0.151927875 0.154460888 0.155580406 0.156590744 0.160938409 0.161657230 0.173229453 0.173740519 0.179003471 0.183896681 0.184929499 0.188889393 0.189959261 0.193802815 0.193871771 0.198251520 0.200016662 0.204879052 0.206761665 0.207081911 0.209739471 0.211276143 0.215175814 0.217210888 0.217633971 0.220394164 0.224865978 0.226201736 0.231759405 0.234792137 0.235336920 0.235620391 0.244443242 0.255685679 0.256999918 0.262718400 0.269578475 0.279817526 0.282857771 0.286141228 0.291335577 0.295778109 0.304166997 0.305485316 0.307090467 0.313186817 0.316223419 0.316721717 0.321893470 0.329149289 0.332223526 0.350175691 0.351795484 0.354656510 0.355401925 0.359814020 0.362638954 0.363104042 0.383437177 0.385793179 0.391542850 0.410391952 0.425222750 0.429757998 0.457562519 0.468517881 0.474154977 0.481615474 0.482764957 0.486810854 0.490269575 0.508463665 0.514691892 0.534914108 0.566018109 0.572672015 0.591747950 0.593393991 0.606234083 0.607435075 0.644180679 0.646332295 0.648325195 0.674172848 0.677312553 0.684818482 0.691372081 0.693026087 0.699322781 0.704125861 0.716845185 0.741174553 0.751155862 0.758277692 0.766039077 0.772268071 0.778724643 0.810411820 0.812565814 0.816355951 0.821562825 0.822159862 0.829206685 0.831251980 0.835525223 0.836638085 0.845098253 0.845832885 0.848113999 0.858213961 0.864489314 0.865359716 0.873088839 0.880917838 0.884257821 0.889276121 0.891803794 0.900540273 0.903724525 0.920343458 0.923307275 0.933026625 0.935033150 0.964860400 0.975620724 0.985611814 1.000909190 1.017360972 1.027157692 1.041240540 1.050173269 1.057254418 1.067780066 1.086511082 1.088430832 1.103462592 1.106132877 1.112194706 1.119467544 1.123416716 1.135430496 1.142634253 1.173908107 1.174717490 1.180791931 1.186184484 1.189662871 1.195755001 1.223561827 1.227177072 1.274236646 1.300930584 1.318934116 1.327767566 1.332590633 1.333993923 1.335629302 1.340368914 1.342622115 1.344875696 1.358457672 1.376876985 1.382805121 1.383898078 1.408929639 1.419525117 1.433956172 1.551420913 1.669103884 1.774645488</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">167</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33983703" y3="0.06149281" z3="-0.19522378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38610347" y3="0.16789142" z3="0.4141806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64850474" y3="0.44480442" z3="-0.34523104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73490922" y3="1.24457715" z3="-2.26815165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39016261" y3="0.44821941" z3="-1.18814131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73630293" y3="0.85513687" z3="-3.66991784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64382548" y3="1.75693456" z3="-3.14544726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39902665" y3="2.60007368" z3="-4.63793065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57213018" y3="1.25988101" z3="-4.38801762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5226097" y3="2.93542807" z3="-5.20135349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92622279" y3="-0.47485378" z3="-3.44224599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09802146" y3="0.06477003" z3="-1.00453965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39695076" y3="-1.07967764" z3="-2.00038526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92579321" y3="-0.94254348" z3="-1.8296302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09386271" y3="-2.40637447" z3="-1.84051594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1463554" y3="-3.62857977" z3="0.685377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01755987" y3="-5.22682983" z3="-4.74384293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24543676" y3="-4.97970124" z3="-3.70348356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.842693" y3="-4.31433391" z3="-1.07744227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77753254" y3="-4.56696387" z3="-2.85158822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55894445" y3="-5.0867702" z3="-3.24237159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85812679" y3="-4.74970482" z3="-1.92469039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49101901" y3="-4.24858079" z3="-1.5224702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80797535" y3="-4.47191328" z3="-3.2004837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35708522" y3="-5.40297046" z3="-3.91809419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.892588" y3="-4.80351828" z3="-1.578137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03383145" y3="-3.87410117" z3="0.24595413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17550619" y3="-3.66208112" z3="0.88938187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06211945" y3="-4.12584594" z3="0.45472722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17236253" y3="-3.52704065" z3="2.35641797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23295858" y3="-3.34032977" z3="5.15418863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36869248" y3="-3.73422545" z3="3.05869436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00653563" y3="-3.23237358" z3="3.07908038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0342836" y3="-3.13917331" z3="4.46753944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39769331" y3="-3.64356911" z3="4.44762167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28224884" y3="-3.97705196" z3="2.50975246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04565969" y3="-3.09882892" z3="2.57524691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10504161" y3="-2.93045125" z3="5.00639189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33480783" y3="-3.81791439" z3="4.98194143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25363464" y3="-3.2762663" z3="6.24582862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41000602" y3="-3.87916105" z3="-0.61889284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16636713" y3="-3.37135473" z3="-1.07128747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52859247" y3="0.25589784" z3="-4.72018773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08336891" y3="-1.73780677" z3="0.03009044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91535017" y3="-0.98804528" z3="1.19379826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85615579" y3="-0.33603679" z3="1.53384093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38358147" y3="0.54062664" z3="1.23668341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47271983" y3="1.455529" z3="-0.38055296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97255601" y3="-0.7132636" z3="1.39366969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36260035" y3="1.71674753" z3="2.69459685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89482923" y3="-0.9817552" z3="2.08667066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67593331" y3="-0.36673951" z3="3.34619405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23058009" y3="0.7744085" z3="-1.21481272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29465199" y3="2.25173412" z3="-0.37078336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45705278" y3="1.93315814" z3="-0.53423815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01071396" y3="-1.08471241" z3="2.4310734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94111732" y3="-0.24442283" z3="1.15134593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84627799" y3="-1.55072413" z3="0.68881851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41381147" y3="1.16553043" z3="3.65018661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57468423" y3="2.30284798" z3="2.69482075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20417524" y3="2.43134194" z3="2.65841137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81535155" y3="-0.81981343" z3="3.86392056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59361798" y3="-0.54408187" z3="3.9221912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50864579" y3="0.71623817" z3="3.22645524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83703868" y3="-0.69380066" z3="0.98733676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41771763" y3="-2.02305407" z3="0.85006138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76441858" y3="-2.66984358" z3="1.89190346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54738243" y3="-1.97428318" z3="3.0777395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01836403" y3="-0.67919443" z3="3.27145293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67157644" y3="-0.04597567" z3="2.21877187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52877697" y3="-2.52274946" z3="-0.11371794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37310791" y3="-3.68050641" z3="1.76911363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68402322" y3="-2.57501815" z3="4.09958045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82947059" y3="-0.16761173" z3="4.21581893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00949654" y3="0.9876737" z3="2.33324015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78604966" y3="0.47861602" z3="-4.28796206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76797286" y3="-0.48844062" z3="-4.45724421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42537424" y3="-1.68193025" z3="-5.08072363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14176003" y3="-1.91483546" z3="-5.56644578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.833301" y3="-0.94494549" z3="-5.37479858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02632576" y3="1.40358446" z3="-3.75769266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78451551" y3="-0.3406846" z3="-4.09096911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43947528" y3="-2.73020279" z3="-5.21439201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08414428" y3="-2.85646215" z3="-6.0658993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85301629" y3="-1.13266822" z3="-5.71576185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34475604" y3="-1.87890476" z3="5.036624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31533694" y3="-3.71935615" z3="3.93392245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22211175" y3="-3.63246712" z3="-5.99469827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43776359" y3="-2.64303748" z3="-4.52708351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07716924" y3="1.1623728" z3="-1.49505135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11953551" y3="1.55330687" z3="-2.47570217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44771133" y3="1.48511676" z3="-1.69183805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86222523" y3="2.14508139" z3="-2.82245362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17157494" y3="1.18653664" z3="-0.92722789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91999341" y3="2.38291552" z3="-2.96560185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58458567" y3="2.21654387" z3="-3.64534788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91762242" y3="2.50357609" z3="-3.81392696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86597373" y3="2.48943353" z3="-4.42157265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25246163" y3="3.00681202" z3="-4.72497504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41985217" y3="3.16048386" z3="-3.35265485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30884275" y3="3.57273369" z3="-4.14613011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23092004" y3="4.17156894" z3="-2.76412263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98761406" y3="5.50411308" z3="-2.99823879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05641055" y3="3.88309895" z3="-2.11145503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62724516" y3="6.25978257" z3="-2.53347693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0915708" y3="4.95817929" z3="-4.38222627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91521095" y3="5.90715554" z3="-3.82891421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24340059" y3="5.25548119" z3="-5.00673641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73676617" y3="6.97013429" z3="-4.01440122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4787757" y3="-2.21795452" z3="-0.29669142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44301881" y3="-3.00730489" z3="-1.06624995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01038946" y3="-2.60472936" z3="0.58754657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09341342" y3="-1.39814552" z3="-0.71439817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17535147" y3="-1.43618958" z3="-1.13575115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31350213" y3="-0.39490698" z3="-1.48145392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09960964" y3="-1.55822234" z3="-0.92662271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.410359" y3="-2.08899235" z3="-1.98954263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0615,-.1952;7.3861,.1679,.4142;6.6485,.4448,-.3452;4.7349,1.2446,-2.2682;4.3902,.4482,-1.1881;2.7363,.8551,-3.6699;3.6438,1.7569,-3.1454;1.399,2.6001,-4.6379;1.5721,1.2599,-4.388;.5226,2.9354,-5.2014;2.9262,-.4749,-3.4422;3.098,.0648,-1.0045;2.397,-1.0797,-2.0004;.9258,-.9425,-1.8296;3.0939,-2.4064,-1.8405;-.1464,-3.6286,.6854;-.0176,-5.2268,-4.7438;-.2454,-4.9797,-3.7035;-.8427,-4.3143,-1.0774;.7775,-4.567,-2.8516;-1.5589,-5.0868,-3.2424;-1.8581,-4.7497,-1.9247;.491,-4.2486,-1.5225;1.808,-4.4719,-3.2005;-2.3571,-5.403,-3.9181;-2.8926,-4.8035,-1.5781;-1.0338,-3.8741,.246;-2.1755,-3.6621,.8894;-3.0621,-4.1258,.4547;-2.1724,-3.527,2.3564;-2.233,-3.3403,5.1542;-3.3687,-3.7342,3.0587;-1.0065,-3.2324,3.0791;-1.0343,-3.1392,4.4675;-3.3977,-3.6436,4.4476;-4.2822,-3.9771,2.5098;-.0457,-3.0988,2.5752;-.105,-2.9305,5.0064;-4.3348,-3.8179,4.9819;-2.2536,-3.2763,6.2458;1.41,-3.8792,-.6189;2.1664,-3.3714,-1.0713;.5286,.2559,-4.7202;-3.0834,-1.7378,.0301;-2.9154,-.988,1.1938;-1.8562,-.336,1.5338;-.3836,.5406,1.2367;-.4727,1.4555,-.3806;.9726,-.7133,1.3937;-.3626,1.7167,2.6946;-3.8948,-.9818,2.0867;-3.6759,-.3667,3.3462;-.2306,.7744,-1.2148;.2947,2.2517,-.3708;-1.4571,1.9332,-.5342;1.0107,-1.0847,2.4311;1.9411,-.2444,1.1513;.8463,-1.5507,.6888;-.4138,1.1655,3.6502;.5747,2.3028,2.6948;-1.2042,2.4313,2.6584;-2.8154,-.8198,3.8639;-4.5936,-.5441,3.9222;-3.5086,.7162,3.2265;4.837,-.6938,.9873;4.4177,-2.0231,.8501;3.7644,-2.6698,1.8919;3.5474,-1.9743,3.0777;4.0184,-.6792,3.2715;4.6716,-.046,2.2188;4.5288,-2.5227,-.1137;3.3731,-3.6805,1.7691;2.684,-2.575,4.0996;3.8295,-.1676,4.2158;5.0095,.9877,2.3332;-.786,.4786,-4.288;-1.768,-.4884,-4.4572;-1.4254,-1.6819,-5.0807;-.1418,-1.9148,-5.5664;.8333,-.9449,-5.3748;-1.0263,1.4036,-3.7577;-2.7845,-.3407,-4.091;-2.4395,-2.7302,-5.2144;.0841,-2.8565,-6.0659;1.853,-1.1327,-5.7158;2.3448,-1.8789,5.0366;2.3153,-3.7194,3.9339;-2.2221,-3.6325,-5.9947;-3.4378,-2.643,-4.5271;7.0772,1.1624,-1.4951;6.1195,1.5533,-2.4757;8.4477,1.4851,-1.6918;8.8622,2.1451,-2.8225;9.1716,1.1865,-.9272;9.92,2.3829,-2.9656;6.5846,2.2165,-3.6453;7.9176,2.5036,-3.8139;5.866,2.4894,-4.4216;8.2525,3.0068,-4.725;3.4199,3.1605,-3.3527;2.3088,3.5727,-4.1461;4.2309,4.1716,-2.7641;3.9876,5.5041,-2.9982;5.0564,3.8831,-2.1115;4.6272,6.2598,-2.5335;2.0916,4.9582,-4.3822;2.9152,5.9072,-3.8289;1.2434,5.2555,-5.0067;2.7368,6.9701,-4.0144;-4.4788,-2.218,-.2967;-4.443,-3.0073,-1.0662;-5.0104,-2.6047,.5875;-5.0934,-1.3981,-.7144;-2.1754,-1.4362,-1.1358;-2.3135,-.3949,-1.4815;-1.0996,-1.5582,-.9266;-2.4104,-2.089,-1.9895;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650415579177</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001813963034 0.000282336174 0.017172588304 0.005344201360</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030511260 -0.000353205 -0.000041502 0.000122937 0.000280639 0.000387012 0.000422197 0.000493880 0.000608372 0.000789895 0.000930766 0.001127803 0.001257507 0.001271374 0.001375457 0.001395627 0.001622206 0.001736119 0.001801692 0.001963082 0.002135841 0.002483485 0.002557867 0.002700479 0.002822569 0.003130490 0.003270315 0.003421634 0.003862829 0.003948956 0.004334460 0.004706153 0.004803071 0.005022807 0.005822538 0.006050050 0.006207432 0.006538458 0.006784091 0.007487893 0.007882661 0.008098809 0.009097949 0.009444654 0.009850595 0.010713684 0.011141012 0.011535146 0.011700304 0.011989964 0.012829765 0.013180717 0.013907940 0.014390124 0.014919199 0.015307634 0.015585896 0.015870660 0.015975924 0.016833632 0.017271291 0.017657435 0.018827017 0.019312538 0.019646954 0.020510007 0.021153966 0.021322368 0.022308955 0.023077578 0.024918136 0.025886631 0.026548290 0.026826743 0.027238321 0.028895699 0.029329239 0.031399400 0.032984527 0.033285989 0.033669074 0.035336467 0.035784792 0.037273174 0.039268606 0.039757591 0.040509359 0.041761657 0.042568211 0.044382082 0.045156834 0.046565591 0.047317425 0.049139256 0.050247076 0.050697414 0.050981612 0.051189006 0.052469309 0.052500848 0.052841665 0.052922372 0.054381717 0.054652921 0.055445886 0.056097321 0.056444129 0.056498819 0.056964120 0.058297609 0.060250236 0.060564599 0.061420738 0.061869261 0.062952988 0.064148961 0.064979502 0.065655535 0.066271788 0.067594757 0.068784874 0.070066881 0.072541071 0.074253005 0.074369663 0.076077340 0.077613586 0.083309092 0.084886430 0.086790156 0.086996384 0.087690638 0.090290483 0.090734046 0.092936244 0.094575617 0.095187899 0.096292532 0.097226566 0.097725543 0.098705274 0.099513098 0.100154498 0.102277018 0.102687353 0.103075133 0.103347233 0.103905846 0.104805118 0.106712876 0.107308267 0.108585937 0.109040078 0.110200380 0.111887742 0.112311819 0.113134050 0.114808268 0.116101853 0.118815066 0.120556965 0.121255000 0.122184100 0.123901927 0.125199043 0.126216051 0.126852788 0.131652156 0.134846461 0.135532711 0.142423294 0.143425817 0.146793467 0.147134000 0.149599703 0.151938755 0.154460856 0.155580594 0.156592267 0.160958883 0.161668234 0.173232004 0.173745357 0.179003459 0.183896717 0.184937399 0.188897244 0.189959272 0.193806872 0.193876596 0.198253297 0.200021300 0.204879320 0.206763390 0.207085056 0.209739680 0.211277183 0.215181966 0.217215238 0.217633842 0.220394327 0.224879518 0.226201725 0.231764120 0.234806143 0.235336913 0.235621643 0.244444067 0.255685799 0.257010266 0.262722073 0.269579267 0.279819397 0.282858169 0.286141384 0.291344242 0.295780864 0.304172085 0.305494454 0.307090629 0.313194909 0.316244831 0.316721854 0.321893871 0.329151808 0.332244377 0.350180943 0.351801350 0.354656631 0.355406578 0.359814264 0.362648127 0.363109549 0.383455540 0.385811538 0.391543369 0.410397813 0.425228492 0.429758513 0.457723127 0.468521466 0.474155214 0.481618097 0.482773898 0.486826734 0.490303350 0.508466125 0.514691838 0.534914419 0.566018427 0.572680027 0.591751902 0.593393940 0.606238473 0.607441621 0.644187557 0.646340249 0.648378647 0.674175613 0.677312756 0.684827506 0.691372061 0.693044437 0.699323651 0.704126068 0.716845218 0.741174741 0.751155858 0.758280535 0.766219775 0.772283061 0.778726005 0.810411848 0.812572796 0.816360261 0.821563901 0.822220139 0.829295569 0.831257773 0.835526156 0.836640067 0.845098974 0.845884589 0.848118180 0.858220359 0.864490790 0.865364657 0.873091686 0.880923478 0.884259156 0.889276510 0.891807036 0.900542052 0.903730681 0.920350141 0.923309717 0.933028618 0.935034161 0.964861950 0.975622417 0.985617988 1.000909892 1.017400470 1.027193450 1.041243814 1.050173362 1.057259253 1.067791017 1.086511166 1.088436426 1.103463940 1.106133934 1.112196238 1.119469183 1.123416707 1.135438415 1.142668041 1.173911002 1.174983444 1.180795107 1.186199192 1.189676701 1.195760644 1.223562909 1.227186421 1.274238104 1.300930824 1.318934166 1.327797050 1.332604245 1.334068053 1.335649399 1.340462253 1.342647858 1.344877164 1.358484227 1.376884334 1.382805880 1.383900490 1.409169417 1.419525124 1.434054676 1.551423010 1.669131416 1.774650326</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">168</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3382629" y3="0.06275277" z3="-0.19191376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38469684" y3="0.17167425" z3="0.41879584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64734124" y3="0.4468381" z3="-0.34162652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73430276" y3="1.24221507" z3="-2.26714467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38902866" y3="0.44795095" z3="-1.18585396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7346755" y3="0.85335844" z3="-3.66730229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64374862" y3="1.75452119" z3="-3.145047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39868459" y3="2.59845574" z3="-4.63653823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57014029" y3="1.2584726" z3="-4.3843562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52236837" y3="2.93477678" z3="-5.19924656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92355273" y3="-0.47632998" z3="-3.43875631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09683933" y3="0.06566498" z3="-1.00198217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39731322" y3="-1.08112758" z3="-1.99607192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92600617" y3="-0.94750894" z3="-1.82403576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09794216" y3="-2.40587093" z3="-1.8360441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14502126" y3="-3.62148628" z3="0.67925621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00781946" y3="-5.23134815" z3="-4.74551655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.237849" y3="-4.98085224" z3="-3.70634169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83963708" y3="-4.30860444" z3="-1.08345202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78411736" y3="-4.5694351" z3="-2.85290991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55315635" y3="-5.08192195" z3="-3.24862861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85500905" y3="-4.7405285" z3="-1.93260815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49529579" y3="-4.24794434" z3="-1.52501941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81640017" y3="-4.48037292" z3="-3.20007436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34951757" y3="-5.39819333" z3="-3.92534536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89175167" y3="-4.78665455" z3="-1.58879478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.031771" y3="-3.868004" z3="0.23955868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17334484" y3="-3.66155371" z3="0.88431635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05913643" y3="-4.12589423" z3="0.44834481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16941491" y3="-3.53164658" z3="2.35185946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22978298" y3="-3.35481859" z3="5.15026426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36502312" y3="-3.74365071" z3="3.05398429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00357245" y3="-3.23780579" z3="3.07512878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03085312" y3="-3.15016991" z3="4.46399397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39448778" y3="-3.6571874" z3="4.44304752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2791571" y3="-3.98528117" z3="2.50439141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04516443" y3="-3.09700351" z3="2.57169628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10312618" y3="-2.93974058" z3="5.00311901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33301237" y3="-3.83220385" z3="4.97721052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25132384" y3="-3.29343889" z3="6.24184336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41138947" y3="-3.87971665" z3="-0.61952489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17104684" y3="-3.37302193" z3="-1.07040154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52515527" y3="0.25553895" z3="-4.71413016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08742335" y3="-1.73553906" z3="0.03142805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91568931" y3="-0.98835038" z3="1.19581021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85793983" y3="-0.33403001" z3="1.53244681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38419453" y3="0.54289058" z3="1.23322413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47250352" y3="1.45448235" z3="-0.3858981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9718661" y3="-0.71100695" z3="1.39504592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36583781" y3="1.72388277" z3="2.68718248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89100373" y3="-0.98607748" z3="2.09320253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6656313" y3="-0.37510352" z3="3.35391611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23279521" y3="0.7721028" z3="-1.21882131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29866491" y3="2.2473648" z3="-0.37782444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45470912" y3="1.93478163" z3="-0.53982805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00774948" y3="-1.08072324" z3="2.43302992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9424879" y3="-0.24399094" z3="1.15392794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84568276" y3="-1.54952811" z3="0.69101504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41616604" y3="1.17700862" z3="3.64545041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56909703" y3="2.31287115" z3="2.68478471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20919293" y3="2.43572624" z3="2.64777688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80218813" y3="-0.8295099" z3="3.86566593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58032301" y3="-0.55411978" z3="3.93488103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49893023" y3="0.70816412" z3="3.23700762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83508171" y3="-0.69047977" z3="0.99181451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41780849" y3="-2.02061561" z3="0.85682382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76468125" y3="-2.66618907" z3="1.89946312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54517072" y3="-1.96835613" z3="3.08344233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01403921" y3="-0.67203779" z3="3.27512549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66750029" y3="-0.04017544" z3="2.22182308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53047799" y3="-2.52213802" z3="-0.1059221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3751127" y3="-3.67781804" z3="1.77844844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68146924" y3="-2.56842761" z3="4.10528018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82301341" y3="-0.15851183" z3="4.21803004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.003557" y3="0.9942642" z3="2.33441274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78887005" y3="0.48227306" z3="-4.28448819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77280201" y3="-0.48301598" z3="-4.45511711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43194347" y3="-1.67781057" z3="-5.07993276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14875755" y3="-1.91518439" z3="-5.56143446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82843111" y3="-0.94695617" z3="-5.36768689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02791452" y3="1.40845527" z3="-3.75520765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78908269" y3="-0.33201986" z3="-4.09071718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44831282" y3="-2.72325305" z3="-5.21351954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.076255" y3="-2.85797254" z3="-6.06140872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84813784" y3="-1.13772913" z3="-5.7060964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33707342" y3="-1.86967134" z3="5.0388515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31807695" y3="-3.71494557" z3="3.94345557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23274987" y3="-3.62537414" z3="-5.99412449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44647599" y3="-2.63444467" z3="-4.52636436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07665149" y3="1.16170909" z3="-1.49279076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11929791" y3="1.55021373" z3="-2.47475726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44738609" y3="1.48386169" z3="-1.68971985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86258661" y3="2.14250221" z3="-2.82121668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17086386" y3="1.18628154" z3="-0.92438991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92045365" y3="2.37972529" z3="-2.96445423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58505545" y3="2.21143108" z3="-3.64547204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91855071" y3="2.49956112" z3="-3.81369684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86664605" y3="2.48257701" z3="-4.42253616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25405031" y3="3.00296671" z3="-4.72522682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42173581" y3="3.15787825" z3="-3.35490783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31083412" y3="3.5701627" z3="-4.14854459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23422554" y3="4.16947668" z3="-2.76846322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99341346" y3="5.50170398" z3="-3.00626448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05887638" y3="3.88177604" z3="-2.11450755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63401903" y3="6.25786505" z3="-2.54300885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09604477" y3="4.95538551" z3="-4.38829884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92208575" y3="5.90400461" z3="-3.83855328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24817663" y3="5.25276145" z3="-5.01313112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74621119" y3="6.9665011" z3="-4.02766148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48409838" y3="-2.21665606" z3="-0.28995449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4522357" y3="-3.00682555" z3="-1.05973145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01199917" y3="-2.60301255" z3="0.5969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10114676" y3="-1.39733545" z3="-0.70534642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18449264" y3="-1.43102075" z3="-1.13744723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32456896" y3="-0.38930583" z3="-1.48030265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10774159" y3="-1.55401188" z3="-0.93294564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42359212" y3="-2.08157489" z3="-1.99212822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3383,.0628,-.1919;7.3847,.1717,.4188;6.6473,.4468,-.3416;4.7343,1.2422,-2.2671;4.389,.448,-1.1859;2.7347,.8534,-3.6673;3.6437,1.7545,-3.145;1.3987,2.5985,-4.6365;1.5701,1.2585,-4.3844;.5224,2.9348,-5.1992;2.9236,-.4763,-3.4388;3.0968,.0657,-1.002;2.3973,-1.0811,-1.9961;.926,-.9475,-1.824;3.0979,-2.4059,-1.836;-.145,-3.6215,.6793;-.0078,-5.2313,-4.7455;-.2378,-4.9809,-3.7063;-.8396,-4.3086,-1.0835;.7841,-4.5694,-2.8529;-1.5532,-5.0819,-3.2486;-1.855,-4.7405,-1.9326;.4953,-4.2479,-1.525;1.8164,-4.4804,-3.2001;-2.3495,-5.3982,-3.9253;-2.8918,-4.7867,-1.5888;-1.0318,-3.868,.2396;-2.1733,-3.6616,.8843;-3.0591,-4.1259,.4483;-2.1694,-3.5316,2.3519;-2.2298,-3.3548,5.1503;-3.365,-3.7437,3.054;-1.0036,-3.2378,3.0751;-1.0309,-3.1502,4.464;-3.3945,-3.6572,4.443;-4.2792,-3.9853,2.5044;-.0452,-3.097,2.5717;-.1031,-2.9397,5.0031;-4.333,-3.8322,4.9772;-2.2513,-3.2934,6.2418;1.4114,-3.8797,-.6195;2.171,-3.373,-1.0704;.5252,.2555,-4.7141;-3.0874,-1.7355,.0314;-2.9157,-.9884,1.1958;-1.8579,-.334,1.5324;-.3842,.5429,1.2332;-.4725,1.4545,-.3859;.9719,-.711,1.395;-.3658,1.7239,2.6872;-3.891,-.9861,2.0932;-3.6656,-.3751,3.3539;-.2328,.7721,-1.2188;.2987,2.2474,-.3778;-1.4547,1.9348,-.5398;1.0077,-1.0807,2.433;1.9425,-.244,1.1539;.8457,-1.5495,.691;-.4162,1.177,3.6455;.5691,2.3129,2.6848;-1.2092,2.4357,2.6478;-2.8022,-.8295,3.8657;-4.5803,-.5541,3.9349;-3.4989,.7082,3.237;4.8351,-.6905,.9918;4.4178,-2.0206,.8568;3.7647,-2.6662,1.8995;3.5452,-1.9684,3.0834;4.014,-.672,3.2751;4.6675,-.0402,2.2218;4.5305,-2.5221,-.1059;3.3751,-3.6778,1.7784;2.6815,-2.5684,4.1053;3.823,-.1585,4.218;5.0036,.9943,2.3344;-.7889,.4823,-4.2845;-1.7728,-.483,-4.4551;-1.4319,-1.6778,-5.0799;-.1488,-1.9152,-5.5614;.8284,-.947,-5.3677;-1.0279,1.4085,-3.7552;-2.7891,-.332,-4.0907;-2.4483,-2.7233,-5.2135;.0763,-2.858,-6.0614;1.8481,-1.1377,-5.7061;2.3371,-1.8697,5.0389;2.3181,-3.7149,3.9435;-2.2327,-3.6254,-5.9941;-3.4465,-2.6344,-4.5264;7.0767,1.1617,-1.4928;6.1193,1.5502,-2.4748;8.4474,1.4839,-1.6897;8.8626,2.1425,-2.8212;9.1709,1.1863,-.9244;9.9205,2.3797,-2.9645;6.5851,2.2114,-3.6455;7.9186,2.4996,-3.8137;5.8666,2.4826,-4.4225;8.2541,3.003,-4.7252;3.4217,3.1579,-3.3549;2.3108,3.5702,-4.1485;4.2342,4.1695,-2.7685;3.9934,5.5017,-3.0063;5.0589,3.8818,-2.1145;4.634,6.2579,-2.543;2.096,4.9554,-4.3883;2.9221,5.904,-3.8386;1.2482,5.2528,-5.0131;2.7462,6.9665,-4.0277;-4.4841,-2.2167,-.29;-4.4522,-3.0068,-1.0597;-5.012,-2.603,.5969;-5.1011,-1.3973,-.7053;-2.1845,-1.431,-1.1374;-2.3246,-.3893,-1.4803;-1.1077,-1.554,-.9329;-2.4236,-2.0816,-1.9921;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417212590</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001960243392 0.000270907060 0.022980930746 0.005384708846</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030509832 -0.000400043 -0.000156437 0.000120138 0.000278037 0.000381623 0.000389344 0.000504358 0.000602400 0.000787115 0.000915233 0.001108664 0.001264822 0.001279150 0.001370761 0.001383161 0.001639126 0.001746988 0.001800734 0.001927995 0.002137698 0.002478576 0.002549743 0.002687493 0.002809872 0.003112084 0.003239791 0.003423569 0.003840838 0.003940401 0.004334231 0.004720792 0.004796617 0.005031435 0.005829476 0.006014023 0.006235667 0.006519104 0.006781034 0.007483084 0.007887725 0.008100886 0.009109374 0.009432988 0.009864342 0.010683856 0.011005382 0.011530742 0.011635127 0.011983335 0.012840930 0.013159380 0.013920136 0.014382725 0.014927405 0.015315046 0.015573567 0.015904810 0.015972520 0.016826570 0.017270057 0.017657795 0.018841050 0.019313367 0.019648304 0.020513832 0.021152506 0.021330247 0.022308320 0.023075792 0.024944846 0.025883172 0.026548017 0.026822173 0.027283077 0.028899352 0.029333199 0.031400673 0.032979017 0.033278404 0.033669521 0.035353908 0.035775212 0.037286486 0.039275213 0.039757669 0.040509356 0.041761993 0.042616810 0.044381966 0.045165511 0.046599027 0.047348222 0.049139679 0.050248340 0.050704548 0.050990156 0.051194560 0.052470305 0.052500834 0.052842819 0.052922602 0.054404679 0.054649070 0.055446783 0.056107837 0.056447100 0.056499077 0.056967465 0.058300123 0.060248425 0.060568927 0.061421083 0.061865066 0.062954087 0.064156288 0.064979707 0.065679249 0.066272294 0.067604287 0.068802876 0.070070495 0.072549091 0.074258295 0.074368186 0.076076550 0.077622227 0.083314223 0.084917936 0.086805331 0.087009003 0.087690902 0.090296338 0.090736449 0.092939752 0.094575674 0.095188094 0.096292956 0.097229401 0.097727259 0.098707754 0.099520211 0.100163626 0.102277373 0.102692474 0.103080454 0.103348786 0.103908518 0.104907379 0.106713024 0.107310999 0.108628043 0.109043586 0.110202554 0.111890944 0.112311677 0.113141633 0.114804783 0.116105691 0.118816112 0.120566774 0.121259439 0.122201703 0.123905142 0.125198268 0.126215316 0.126856414 0.131650541 0.134852622 0.135539667 0.142425001 0.143431347 0.146798570 0.147139627 0.149597453 0.151951379 0.154455293 0.155580115 0.156591415 0.160951986 0.161688893 0.173238920 0.173751854 0.179019532 0.183899208 0.184949895 0.188901823 0.189960598 0.193816831 0.193892052 0.198253573 0.200023709 0.204885464 0.206763261 0.207083463 0.209739711 0.211277301 0.215202741 0.217229792 0.217636516 0.220396110 0.224879715 0.226202680 0.231767549 0.234819500 0.235339809 0.235638717 0.244447007 0.255686096 0.257019685 0.262727531 0.269588054 0.279820967 0.282857719 0.286141568 0.291355900 0.295803347 0.304174993 0.305509658 0.307097825 0.313214197 0.316286630 0.316725791 0.321894222 0.329165602 0.332278974 0.350181829 0.351814127 0.354656186 0.355408457 0.359814650 0.362664962 0.363112317 0.383524186 0.385810831 0.391546705 0.410397691 0.425233234 0.429763975 0.457797322 0.468524788 0.474197646 0.481653950 0.482780092 0.486866046 0.490315069 0.508476844 0.514694613 0.534902642 0.565996960 0.572671930 0.591756779 0.593398658 0.606241010 0.607459148 0.644216193 0.646328994 0.648407882 0.674183250 0.677319910 0.684840644 0.691373640 0.693046938 0.699327785 0.704126225 0.716848595 0.741175021 0.751156345 0.758287070 0.766383326 0.772297181 0.778731166 0.810410402 0.812579196 0.816375183 0.821563150 0.822272618 0.829354466 0.831274521 0.835525940 0.836657973 0.845101214 0.845892226 0.848117780 0.858224828 0.864481342 0.865366832 0.873106616 0.880939285 0.884264273 0.889276218 0.891806915 0.900541839 0.903740791 0.920353274 0.923313430 0.933012251 0.935035208 0.964868847 0.975623537 0.985619231 1.000910233 1.017420460 1.027210315 1.041248211 1.050180509 1.057259570 1.067793812 1.086511350 1.088440659 1.103462856 1.106140992 1.112199035 1.119470207 1.123418425 1.135440920 1.142700250 1.173914070 1.175113123 1.180801674 1.186203400 1.189659432 1.195755000 1.223580758 1.227213044 1.274148587 1.300923092 1.318930763 1.327828894 1.332562330 1.334168564 1.335656338 1.340591852 1.342717341 1.344874757 1.358512971 1.376884323 1.382810642 1.383900893 1.409602790 1.419523340 1.434185083 1.551423772 1.669109866 1.774649492</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">169</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33586292" y3="0.06699106" z3="-0.18804915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38148797" y3="0.17402393" z3="0.42370009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6450854" y3="0.44843185" z3="-0.33783476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73451847" y3="1.24286001" z3="-2.26600408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38774739" y3="0.45061844" z3="-1.18359317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73493333" y3="0.85288864" z3="-3.6663499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64470825" y3="1.75445769" z3="-3.14526542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40060509" y3="2.59792074" z3="-4.63840258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5706605" y3="1.25819444" z3="-4.38387303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52440587" y3="2.93362721" z3="-5.20188872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92346495" y3="-0.4769076" z3="-3.43685914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09518707" y3="0.06807495" z3="-1.00059238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39763786" y3="-1.08116683" z3="-1.99346398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92595248" y3="-0.94997816" z3="-1.82190676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1002642" y3="-2.40463823" z3="-1.8316789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14315668" y3="-3.61870935" z3="0.67500018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00232253" y3="-5.22877452" z3="-4.74920688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2333468" y3="-4.97731311" z3="-3.71052011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83767714" y3="-4.30338778" z3="-1.08848917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78876732" y3="-4.56977963" z3="-2.85486969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54962177" y3="-5.07454312" z3="-3.25515396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85267757" y3="-4.73223518" z3="-1.9397256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49853244" y3="-4.247394" z3="-1.5275282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82173083" y3="-4.48329187" z3="-3.19934047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34687243" y3="-5.38740729" z3="-3.9334612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88893101" y3="-4.77794459" z3="-1.59825442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03044493" y3="-3.86352089" z3="0.23466157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17199756" y3="-3.66124589" z3="0.88061291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05698426" y3="-4.12599808" z3="0.44356891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.168184" y3="-3.53506571" z3="2.34831865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22731154" y3="-3.3702237" z3="5.14742675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36287225" y3="-3.75297441" z3="3.05005884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00319669" y3="-3.24020464" z3="3.07207553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0302168" y3="-3.15795628" z3="4.46126903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39136127" y3="-3.67297279" z3="4.43962092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27613229" y3="-3.99545448" z3="2.50004185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04412987" y3="-3.09694713" z3="2.56831496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10221671" y3="-2.94810527" z3="5.00123722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32760645" y3="-3.85518478" z3="4.9734502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24752439" y3="-3.31457437" z3="6.23949554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41607629" y3="-3.88419807" z3="-0.6199881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17402344" y3="-3.37469376" z3="-1.06843003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52436799" y3="0.25617872" z3="-4.71293316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09252043" y3="-1.73422283" z3="0.03410199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91626913" y3="-0.98916004" z3="1.19937839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85643283" y3="-0.33447623" z3="1.53191159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38645761" y3="0.54507279" z3="1.23039065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47485933" y3="1.45303059" z3="-0.39076299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97000104" y3="-0.70754785" z3="1.39515771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36900858" y3="1.72986502" z3="2.68147641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8873714" y3="-0.98992057" z3="2.10162899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65655669" y3="-0.38414008" z3="3.36372281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23896368" y3="0.76790463" z3="-1.22334356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29838458" y3="2.24384416" z3="-0.38571656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45619163" y3="1.93685596" z3="-0.54330462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0046801" y3="-1.0762048" z3="2.43370098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93994602" y3="-0.24047709" z3="1.15416877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84471899" y3="-1.54652738" z3="0.69191657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41843471" y3="1.18485577" z3="3.64075597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56632609" y3="2.31917775" z3="2.67775745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21289769" y3="2.44153599" z3="2.6404311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79107199" y3="-0.84114057" z3="3.86990079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56869489" y3="-0.56584419" z3="3.94721158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4900879" y3="0.69962537" z3="3.25065011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83143481" y3="-0.68446309" z3="0.99626085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41766593" y3="-2.01589691" z3="0.86363197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76478909" y3="-2.66088083" z3="1.90683554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54178305" y3="-1.9609709" z3="3.0888496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00657557" y3="-0.66290601" z3="3.2780398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65990796" y3="-0.03172179" z3="2.22423426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53364141" y3="-2.51937908" z3="-0.09748372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37872901" y3="-3.67400889" z3="1.78816081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67996257" y3="-2.56170235" z3="4.1119358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81316163" y3="-0.14788495" z3="4.21972952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99338219" y3="1.0037731" z3="2.33493803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79024149" y3="0.4850944" z3="-4.28399038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77569764" y3="-0.47824307" z3="-4.45374911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43662111" y3="-1.67407432" z3="-5.0742944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15274236" y3="-1.91351158" z3="-5.5561619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82587812" y3="-0.94754061" z3="-5.36386058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0281903" y3="1.41240295" z3="-3.75668024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79272991" y3="-0.32560974" z3="-4.09045045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45495422" y3="-2.71794537" z3="-5.21075925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07028508" y3="-2.85708545" z3="-6.05331594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84561771" y3="-1.14030284" z3="-5.701538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33090013" y3="-1.86161709" z3="5.0426705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3230712" y3="-3.71049801" z3="3.95406463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24095439" y3="-3.61963427" z3="-5.99269117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45294642" y3="-2.62788556" z3="-4.52367593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07594128" y3="1.16047177" z3="-1.49021512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11988706" y3="1.54874978" z3="-2.47341555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44719513" y3="1.47986693" z3="-1.68716045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86389367" y3="2.13379885" z3="-2.82043852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16977826" y3="1.18337675" z3="-0.92053656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9222882" y3="2.36916836" z3="-2.96370952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58719563" y3="2.20620161" z3="-3.6455019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92086027" y3="2.48980648" z3="-3.81427936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8697015" y3="2.4772116" z3="-4.42341237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25744947" y3="2.98858809" z3="-4.72723653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4242481" y3="3.15795671" z3="-3.35763042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31384573" y3="3.57004041" z3="-4.15201381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23894581" y3="4.16938507" z3="-2.77467972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.00023329" y3="5.50153326" z3="-3.0158416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06389602" y3="3.88167135" z3="-2.12105676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.64322323" y3="6.2571043" z3="-2.55607638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.1010369" y3="4.95508214" z3="-4.39509285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92878172" y3="5.90397393" z3="-3.84801308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25348563" y3="5.25196997" z3="-5.02062864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.75416734" y3="6.96662942" z3="-4.03941533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48912283" y3="-2.21760609" z3="-0.28282932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4573395" y3="-3.0061162" z3="-1.0533623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01307146" y3="-2.60653707" z3="0.60485085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10910958" y3="-1.39915814" z3="-0.69545688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19394113" y3="-1.42740036" z3="-1.13777182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33545382" y3="-0.38502773" z3="-1.47794476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11630126" y3="-1.55070904" z3="-0.93766565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43623238" y3="-2.07645595" z3="-1.99252943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3359,.067,-.188;7.3815,.174,.4237;6.6451,.4484,-.3378;4.7345,1.2429,-2.266;4.3877,.4506,-1.1836;2.7349,.8529,-3.6663;3.6447,1.7545,-3.1453;1.4006,2.5979,-4.6384;1.5707,1.2582,-4.3839;.5244,2.9336,-5.2019;2.9235,-.4769,-3.4369;3.0952,.0681,-1.0006;2.3976,-1.0812,-1.9935;.926,-.95,-1.8219;3.1003,-2.4046,-1.8317;-.1432,-3.6187,.675;-.0023,-5.2288,-4.7492;-.2333,-4.9773,-3.7105;-.8377,-4.3034,-1.0885;.7888,-4.5698,-2.8549;-1.5496,-5.0745,-3.2552;-1.8527,-4.7322,-1.9397;.4985,-4.2474,-1.5275;1.8217,-4.4833,-3.1993;-2.3469,-5.3874,-3.9335;-2.8889,-4.7779,-1.5983;-1.0304,-3.8635,.2347;-2.172,-3.6612,.8806;-3.057,-4.126,.4436;-2.1682,-3.5351,2.3483;-2.2273,-3.3702,5.1474;-3.3629,-3.753,3.0501;-1.0032,-3.2402,3.0721;-1.0302,-3.158,4.4613;-3.3914,-3.673,4.4396;-4.2761,-3.9955,2.5;-.0441,-3.0969,2.5683;-.1022,-2.9481,5.0012;-4.3276,-3.8552,4.9735;-2.2475,-3.3146,6.2395;1.4161,-3.8842,-.62;2.174,-3.3747,-1.0684;.5244,.2562,-4.7129;-3.0925,-1.7342,.0341;-2.9163,-.9892,1.1994;-1.8564,-.3345,1.5319;-.3865,.5451,1.2304;-.4749,1.453,-.3908;.97,-.7075,1.3952;-.369,1.7299,2.6815;-3.8874,-.9899,2.1016;-3.6566,-.3841,3.3637;-.239,.7679,-1.2233;.2984,2.2438,-.3857;-1.4562,1.9369,-.5433;1.0047,-1.0762,2.4337;1.9399,-.2405,1.1542;.8447,-1.5465,.6919;-.4184,1.1849,3.6408;.5663,2.3192,2.6778;-1.2129,2.4415,2.6404;-2.7911,-.8411,3.8699;-4.5687,-.5658,3.9472;-3.4901,.6996,3.2507;4.8314,-.6845,.9963;4.4177,-2.0159,.8636;3.7648,-2.6609,1.9068;3.5418,-1.961,3.0888;4.0066,-.6629,3.278;4.6599,-.0317,2.2242;4.5336,-2.5194,-.0975;3.3787,-3.674,1.7882;2.68,-2.5617,4.1119;3.8132,-.1479,4.2197;4.9934,1.0038,2.3349;-.7902,.4851,-4.284;-1.7757,-.4782,-4.4537;-1.4366,-1.6741,-5.0743;-.1527,-1.9135,-5.5562;.8259,-.9475,-5.3639;-1.0282,1.4124,-3.7567;-2.7927,-.3256,-4.0905;-2.455,-2.7179,-5.2108;.0703,-2.8571,-6.0533;1.8456,-1.1403,-5.7015;2.3309,-1.8616,5.0427;2.3231,-3.7105,3.9541;-2.241,-3.6196,-5.9927;-3.4529,-2.6279,-4.5237;7.0759,1.1605,-1.4902;6.1199,1.5487,-2.4734;8.4472,1.4799,-1.6872;8.8639,2.1338,-2.8204;9.1698,1.1834,-.9205;9.9223,2.3692,-2.9637;6.5872,2.2062,-3.6455;7.9209,2.4898,-3.8143;5.8697,2.4772,-4.4234;8.2574,2.9886,-4.7272;3.4242,3.158,-3.3576;2.3138,3.57,-4.152;4.2389,4.1694,-2.7747;4.0002,5.5015,-3.0158;5.0639,3.8817,-2.1211;4.6432,6.2571,-2.5561;2.101,4.9551,-4.3951;2.9288,5.904,-3.848;1.2535,5.252,-5.0206;2.7542,6.9666,-4.0394;-4.4891,-2.2176,-.2828;-4.4573,-3.0061,-1.0534;-5.0131,-2.6065,.6049;-5.1091,-1.3992,-.6955;-2.1939,-1.4274,-1.1378;-2.3355,-.385,-1.4779;-1.1163,-1.5507,-.9377;-2.4362,-2.0765,-1.9925;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412969475</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002355220042 0.000260377329 0.029931571868 0.005333495810</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030510252 -0.000783401 -0.000249692 0.000129651 0.000266010 0.000375300 0.000390616 0.000498594 0.000604043 0.000789868 0.000914132 0.001108947 0.001267905 0.001279975 0.001368612 0.001385000 0.001636681 0.001749325 0.001801788 0.001932705 0.002140636 0.002474710 0.002546896 0.002688449 0.002809039 0.003114643 0.003234282 0.003424200 0.003840433 0.003941671 0.004334274 0.004724575 0.004794541 0.005032136 0.005833801 0.006014377 0.006241973 0.006517656 0.006780857 0.007482368 0.007890680 0.008100727 0.009129442 0.009431975 0.009877074 0.010686948 0.011006113 0.011530896 0.011656687 0.011983218 0.012845296 0.013160799 0.013933051 0.014383698 0.014929569 0.015316947 0.015573729 0.015918306 0.015973500 0.016824972 0.017272887 0.017659590 0.018845131 0.019315013 0.019649375 0.020517523 0.021154344 0.021334576 0.022312610 0.023076893 0.024959724 0.025891703 0.026548370 0.026828260 0.027321936 0.028906727 0.029335395 0.031401695 0.032978504 0.033278251 0.033669465 0.035357906 0.035781751 0.037300225 0.039278713 0.039756398 0.040509668 0.041762429 0.042630990 0.044382575 0.045170498 0.046618427 0.047354410 0.049139855 0.050252784 0.050706094 0.050992392 0.051196790 0.052470766 0.052500896 0.052843054 0.052923912 0.054417354 0.054649151 0.055447206 0.056116225 0.056451579 0.056499407 0.056971580 0.058301382 0.060249119 0.060573094 0.061421692 0.061868477 0.062955629 0.064156884 0.064980960 0.065687651 0.066278155 0.067612760 0.068826710 0.070076161 0.072552478 0.074268337 0.074367542 0.076081068 0.077633258 0.083319670 0.084939692 0.086808898 0.087024198 0.087691844 0.090301449 0.090737086 0.092942717 0.094575623 0.095188013 0.096292986 0.097231626 0.097728457 0.098711890 0.099535068 0.100171563 0.102277480 0.102695572 0.103083753 0.103352261 0.103910049 0.104979225 0.106712952 0.107311587 0.108658855 0.109046123 0.110205206 0.111896961 0.112311744 0.113156830 0.114812340 0.116107528 0.118817084 0.120570358 0.121260977 0.122218870 0.123909163 0.125199159 0.126215694 0.126856831 0.131651677 0.134861786 0.135544210 0.142428432 0.143434959 0.146803824 0.147143777 0.149599704 0.151959653 0.154454903 0.155586088 0.156594930 0.160992042 0.161694029 0.173240687 0.173757184 0.179050683 0.183901453 0.184968752 0.188902645 0.189962515 0.193820691 0.193900123 0.198253653 0.200023635 0.204888478 0.206763834 0.207084604 0.209739706 0.211285448 0.215230144 0.217244767 0.217642834 0.220397520 0.224885395 0.226203029 0.231768848 0.234822714 0.235347071 0.235654448 0.244449893 0.255686662 0.257026912 0.262733296 0.269591223 0.279821396 0.282857601 0.286142004 0.291366439 0.295824501 0.304177460 0.305526958 0.307101507 0.313234385 0.316336473 0.316742393 0.321894516 0.329180584 0.332320077 0.350186645 0.351816887 0.354658033 0.355408723 0.359814988 0.362669351 0.363113135 0.383605237 0.385827156 0.391549415 0.410404543 0.425237309 0.429767455 0.457833219 0.468527667 0.474215035 0.481678040 0.482780381 0.486905717 0.490326913 0.508486947 0.514711020 0.534912164 0.565996963 0.572681181 0.591760483 0.593401528 0.606243497 0.607475029 0.644271904 0.646334282 0.648443400 0.674184866 0.677323544 0.684855499 0.691378929 0.693058715 0.699329269 0.704127420 0.716850625 0.741175035 0.751157730 0.758289867 0.766505113 0.772305908 0.778736275 0.810410248 0.812590348 0.816407117 0.821564195 0.822294702 0.829397417 0.831289752 0.835528014 0.836667385 0.845102952 0.845901249 0.848121199 0.858225890 0.864491077 0.865367079 0.873117726 0.880961147 0.884267149 0.889278550 0.891806919 0.900542063 0.903755110 0.920361083 0.923315651 0.933015777 0.935036938 0.964874667 0.975626891 0.985620038 1.000910242 1.017432860 1.027224089 1.041249923 1.050187259 1.057260225 1.067794285 1.086511449 1.088443742 1.103464928 1.106143634 1.112201204 1.119471247 1.123424286 1.135442053 1.142726325 1.173916106 1.175195591 1.180809110 1.186209754 1.189664819 1.195756279 1.223605563 1.227228961 1.274152176 1.300923142 1.318934090 1.327853014 1.332578398 1.334246408 1.335663570 1.340677925 1.342747736 1.344879059 1.358554939 1.376886540 1.382813104 1.383902291 1.410173376 1.419528185 1.434337485 1.551425148 1.669135026 1.774650750</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">170</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33511707" y3="0.06220373" z3="-0.18861752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3805321" y3="0.17051192" z3="0.42442084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64445367" y3="0.44520758" z3="-0.33730377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7343452" y3="1.23941537" z3="-2.26613146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38748786" y3="0.44629212" z3="-1.1844177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73378795" y3="0.85213181" z3="-3.66554259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64432007" y3="1.75255641" z3="-3.14427878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39724237" y3="2.59882226" z3="-4.63129486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56773464" y3="1.25842755" z3="-4.37966875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52022145" y3="2.93585038" z3="-5.19249401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92316852" y3="-0.47795138" z3="-3.43903104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09502565" y3="0.06380816" z3="-1.00233201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39975486" y3="-1.08571054" z3="-1.99649909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92780147" y3="-0.95881612" z3="-1.82438342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10577053" y3="-2.40759936" z3="-1.83650471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13978122" y3="-3.61348245" z3="0.67495893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00602889" y3="-5.23279095" z3="-4.74667199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22634662" y3="-4.97913817" z3="-3.70878047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83278699" y3="-4.30069246" z3="-1.08843947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79470872" y3="-4.57101726" z3="-2.85297616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54356976" y3="-5.07301771" z3="-3.25485013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8476454" y3="-4.72831725" z3="-1.94029583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50360432" y3="-4.24669226" z3="-1.52631389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82877533" y3="-4.48742573" z3="-3.19704899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.33920813" y3="-5.38651256" z3="-3.93327698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88554378" y3="-4.768346" z3="-1.60015453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02622162" y3="-3.86020988" z3="0.23438446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16827404" y3="-3.66099773" z3="0.879978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05200482" y3="-4.12702888" z3="0.44190284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16591295" y3="-3.53555451" z3="2.34767732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22891789" y3="-3.37314134" z3="5.14677686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36111412" y3="-3.75595089" z3="3.04779961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00173614" y3="-3.24013963" z3="3.07316005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03059166" y3="-3.15946058" z3="4.46242601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39178282" y3="-3.67682687" z3="4.43725986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27341451" y3="-3.99966998" z3="2.49635007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04315666" y3="-3.09361536" z3="2.57092289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10430193" y3="-2.94789689" z3="5.0035272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32930646" y3="-3.85994633" z3="4.96976311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25111105" y3="-3.31805215" z3="6.23870273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42027894" y3="-3.88276067" z3="-0.61879156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17958731" y3="-3.37591178" z3="-1.0685674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5203365" y3="0.25693076" z3="-4.70752123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.09353361" y3="-1.73447924" z3="0.03387078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91438746" y3="-0.98840167" z3="1.19750871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85565103" y3="-0.33103229" z3="1.52572897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38562568" y3="0.54874938" z3="1.21758001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47482677" y3="1.44851234" z3="-0.40826803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97167027" y3="-0.70213763" z3="1.39104575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36962666" y3="1.74399079" z3="2.66002304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88221245" y3="-0.98996576" z3="2.10298446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64653547" y3="-0.38420825" z3="3.36432079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2387115" y3="0.76055379" z3="-1.23725132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30045672" y3="2.23822918" z3="-0.40692315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45523246" y3="1.93166592" z3="-0.56320148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00296385" y3="-1.0680131" z3="2.43070395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9429661" y3="-0.23549418" z3="1.15251505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84869874" y3="-1.54322455" z3="0.68927556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41300569" y3="1.20714478" z3="3.62427393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56168529" y3="2.33914467" z3="2.64782588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21772902" y3="2.45016942" z3="2.61575617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77846605" y3="-0.84073595" z3="3.8666246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55612547" y3="-0.56628385" z3="3.95226941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48102352" y3="0.69968098" z3="3.25083652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83053305" y3="-0.68859103" z3="0.99598079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41354292" y3="-2.01895404" z3="0.86315512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76025955" y3="-2.66285568" z3="1.90671465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.53998286" y3="-1.96296808" z3="3.08931902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00815513" y3="-0.66618921" z3="3.27870883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66211487" y3="-0.03611154" z3="2.22462492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52702986" y3="-2.52195578" z3="-0.09872545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37139829" y3="-3.67496418" z3="1.78753806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6764368" y3="-2.56197002" z3="4.11186294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81643695" y3="-0.15101702" z3="4.22041659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99801385" y3="0.99852297" z3="2.33557385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79378898" y3="0.48827418" z3="-4.27978811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78023652" y3="-0.47434175" z3="-4.44881652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44160989" y3="-1.67143538" z3="-5.0714808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15823393" y3="-1.91349131" z3="-5.54978516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82131087" y3="-0.94806247" z3="-5.35825587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03113291" y3="1.41644329" z3="-3.75314905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79679805" y3="-0.31975035" z3="-4.08653553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.46063147" y3="-2.71412846" z3="-5.20374533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06474824" y3="-2.85821121" z3="-6.04686608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84122455" y3="-1.14238945" z3="-5.69432807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3280565" y3="-1.86087811" z3="5.04186132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31682656" y3="-3.7102977" z3="3.95358399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24761237" y3="-3.61659114" z3="-5.98442609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45860506" y3="-2.6231963" z3="-4.51613772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07556669" y3="1.15811788" z3="-1.48901601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11971118" y3="1.54607026" z3="-2.4726254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44660673" y3="1.47903703" z3="-1.68463188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86358411" y3="2.13589529" z3="-2.81648412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.168788" y3="1.18188421" z3="-0.9179638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92158413" y3="2.37205265" z3="-2.95868775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58725895" y3="2.20510367" z3="-3.64375732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92104774" y3="2.49199811" z3="-3.81071934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8698858" y3="2.47557434" z3="-4.42203028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25799636" y3="2.99338249" z3="-4.72263402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42364396" y3="3.1561813" z3="-3.35410877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31171377" y3="3.56963868" z3="-4.14574431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23873655" y3="4.16705245" z3="-2.77008155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99963362" y3="5.4995466" z3="-3.00875507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0642259" y3="3.87875173" z3="-2.11748001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.64226603" y3="6.25534108" z3="-2.54731533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09864133" y3="4.95501195" z3="-4.38641206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92729589" y3="5.902942" z3="-3.83924696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25002949" y3="5.25314143" z3="-5.00988248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.75309616" y3="6.96549366" z3="-4.02932691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.49103431" y3="-2.21994273" z3="-0.27684195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46298806" y3="-3.01077216" z3="-1.0463003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01101667" y3="-2.60702097" z3="0.61455199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.11374051" y3="-1.40292205" z3="-0.6882996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1991458" y3="-1.42825339" z3="-1.14105064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34243197" y3="-0.38601065" z3="-1.48178284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.12095932" y3="-1.55064147" z3="-0.94345733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4438571" y3="-2.07822632" z3="-1.99457754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3351,.0622,-.1886;7.3805,.1705,.4244;6.6445,.4452,-.3373;4.7343,1.2394,-2.2661;4.3875,.4463,-1.1844;2.7338,.8521,-3.6655;3.6443,1.7526,-3.1443;1.3972,2.5988,-4.6313;1.5677,1.2584,-4.3797;.5202,2.9359,-5.1925;2.9232,-.478,-3.439;3.095,.0638,-1.0023;2.3998,-1.0857,-1.9965;.9278,-.9588,-1.8244;3.1058,-2.4076,-1.8365;-.1398,-3.6135,.675;.006,-5.2328,-4.7467;-.2263,-4.9791,-3.7088;-.8328,-4.3007,-1.0884;.7947,-4.571,-2.853;-1.5436,-5.073,-3.2549;-1.8476,-4.7283,-1.9403;.5036,-4.2467,-1.5263;1.8288,-4.4874,-3.197;-2.3392,-5.3865,-3.9333;-2.8855,-4.7683,-1.6002;-1.0262,-3.8602,.2344;-2.1683,-3.661,.88;-3.052,-4.127,.4419;-2.1659,-3.5356,2.3477;-2.2289,-3.3731,5.1468;-3.3611,-3.756,3.0478;-1.0017,-3.2401,3.0732;-1.0306,-3.1595,4.4624;-3.3918,-3.6768,4.4373;-4.2734,-3.9997,2.4964;-.0432,-3.0936,2.5709;-.1043,-2.9479,5.0035;-4.3293,-3.8599,4.9698;-2.2511,-3.3181,6.2387;1.4203,-3.8828,-.6188;2.1796,-3.3759,-1.0686;.5203,.2569,-4.7075;-3.0935,-1.7345,.0339;-2.9144,-.9884,1.1975;-1.8557,-.331,1.5257;-.3856,.5487,1.2176;-.4748,1.4485,-.4083;.9717,-.7021,1.391;-.3696,1.744,2.66;-3.8822,-.99,2.103;-3.6465,-.3842,3.3643;-.2387,.7606,-1.2373;.3005,2.2382,-.4069;-1.4552,1.9317,-.5632;1.003,-1.068,2.4307;1.943,-.2355,1.1525;.8487,-1.5432,.6893;-.413,1.2071,3.6243;.5617,2.3391,2.6478;-1.2177,2.4502,2.6158;-2.7785,-.8407,3.8666;-4.5561,-.5663,3.9523;-3.481,.6997,3.2508;4.8305,-.6886,.996;4.4135,-2.019,.8632;3.7603,-2.6629,1.9067;3.54,-1.963,3.0893;4.0082,-.6662,3.2787;4.6621,-.0361,2.2246;4.527,-2.522,-.0987;3.3714,-3.675,1.7875;2.6764,-2.562,4.1119;3.8164,-.151,4.2204;4.998,.9985,2.3356;-.7938,.4883,-4.2798;-1.7802,-.4743,-4.4488;-1.4416,-1.6714,-5.0715;-.1582,-1.9135,-5.5498;.8213,-.9481,-5.3583;-1.0311,1.4164,-3.7531;-2.7968,-.3198,-4.0865;-2.4606,-2.7141,-5.2037;.0647,-2.8582,-6.0469;1.8412,-1.1424,-5.6943;2.3281,-1.8609,5.0419;2.3168,-3.7103,3.9536;-2.2476,-3.6166,-5.9844;-3.4586,-2.6232,-4.5161;7.0756,1.1581,-1.489;6.1197,1.5461,-2.4726;8.4466,1.479,-1.6846;8.8636,2.1359,-2.8165;9.1688,1.1819,-.918;9.9216,2.3721,-2.9587;6.5873,2.2051,-3.6438;7.921,2.492,-3.8107;5.8699,2.4756,-4.422;8.258,2.9934,-4.7226;3.4236,3.1562,-3.3541;2.3117,3.5696,-4.1457;4.2387,4.1671,-2.7701;3.9996,5.4995,-3.0088;5.0642,3.8788,-2.1175;4.6423,6.2553,-2.5473;2.0986,4.955,-4.3864;2.9273,5.9029,-3.8392;1.25,5.2531,-5.0099;2.7531,6.9655,-4.0293;-4.491,-2.2199,-.2768;-4.463,-3.0108,-1.0463;-5.011,-2.607,.6146;-5.1137,-1.4029,-.6883;-2.1991,-1.4283,-1.1411;-2.3424,-.386,-1.4818;-1.121,-1.5506,-.9435;-2.4439,-2.0782,-1.9946;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650404704116</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003403713090 0.000326542847 0.026784106974 0.005335434238</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030510673 -0.000554307 0.000033258 0.000157302 0.000269232 0.000389531 0.000414538 0.000523011 0.000606711 0.000790699 0.000913797 0.001109532 0.001269936 0.001282761 0.001368695 0.001385490 0.001636510 0.001749182 0.001801736 0.001933741 0.002140952 0.002480079 0.002550118 0.002688027 0.002811888 0.003114016 0.003235796 0.003424898 0.003840773 0.003942762 0.004334364 0.004725295 0.004794494 0.005032077 0.005837752 0.006028970 0.006250942 0.006517607 0.006783320 0.007487988 0.007898263 0.008102307 0.009136285 0.009431848 0.009891288 0.010691277 0.011015031 0.011532088 0.011657704 0.011984662 0.012847414 0.013161440 0.013944373 0.014384159 0.014929890 0.015316822 0.015573820 0.015921917 0.015974560 0.016829734 0.017275770 0.017661513 0.018845589 0.019320728 0.019652539 0.020519082 0.021155111 0.021336063 0.022316991 0.023077326 0.024966822 0.025899981 0.026548933 0.026830974 0.027338155 0.028912465 0.029337458 0.031401714 0.032983001 0.033278151 0.033669460 0.035364907 0.035783230 0.037304828 0.039279435 0.039757415 0.040509413 0.041762295 0.042630125 0.044382519 0.045179651 0.046635076 0.047354219 0.049139858 0.050253846 0.050708954 0.050995115 0.051199740 0.052470916 0.052500934 0.052843006 0.052926555 0.054429497 0.054648757 0.055447299 0.056122356 0.056455853 0.056499260 0.056975130 0.058301577 0.060249108 0.060573600 0.061422736 0.061872433 0.062957402 0.064156941 0.064981848 0.065687053 0.066280566 0.067618723 0.068837625 0.070084460 0.072552817 0.074272540 0.074368274 0.076084492 0.077644884 0.083326094 0.084956129 0.086811830 0.087039441 0.087691712 0.090304239 0.090737025 0.092943692 0.094575608 0.095188422 0.096292955 0.097231858 0.097728846 0.098716359 0.099545828 0.100179123 0.102277473 0.102698733 0.103086136 0.103352860 0.103910426 0.105001566 0.106713369 0.107311389 0.108690901 0.109047418 0.110205086 0.111905030 0.112313153 0.113174737 0.114812496 0.116108726 0.118818050 0.120570654 0.121261081 0.122235572 0.123914809 0.125201264 0.126216238 0.126856812 0.131651637 0.134863746 0.135547537 0.142431970 0.143437545 0.146807625 0.147147617 0.149601415 0.151964863 0.154454934 0.155600463 0.156598603 0.161035968 0.161696751 0.173240636 0.173759428 0.179081050 0.183903058 0.184983021 0.188902887 0.189963003 0.193822846 0.193901137 0.198253753 0.200023645 0.204888865 0.206764113 0.207085510 0.209739716 0.211288543 0.215270523 0.217264604 0.217644265 0.220398400 0.224885139 0.226203031 0.231769115 0.234825761 0.235353131 0.235679318 0.244452941 0.255687425 0.257030701 0.262739290 0.269593153 0.279822501 0.282857674 0.286143145 0.291373944 0.295845709 0.304178040 0.305542587 0.307101314 0.313254784 0.316378124 0.316766060 0.321894503 0.329206023 0.332351958 0.350193635 0.351819429 0.354658689 0.355409106 0.359815785 0.362674429 0.363114127 0.383706960 0.385844863 0.391551712 0.410408311 0.425237698 0.429781609 0.457850960 0.468529351 0.474214695 0.481695135 0.482780655 0.486933228 0.490329049 0.508501519 0.514726146 0.534922734 0.565997142 0.572691071 0.591760504 0.593401695 0.606243938 0.607487454 0.644321210 0.646340683 0.648464916 0.674186454 0.677323971 0.684870832 0.691387439 0.693065453 0.699333638 0.704128734 0.716851038 0.741175094 0.751159275 0.758295391 0.766563889 0.772309083 0.778740545 0.810420167 0.812594962 0.816464779 0.821566307 0.822329448 0.829485018 0.831301183 0.835528995 0.836675966 0.845105894 0.845909764 0.848125037 0.858227088 0.864499192 0.865367111 0.873126825 0.880990335 0.884269499 0.889279305 0.891807074 0.900542010 0.903779702 0.920370230 0.923316372 0.933024794 0.935037954 0.964876114 0.975630589 0.985620509 1.000910929 1.017435339 1.027233512 1.041249941 1.050192699 1.057260688 1.067796127 1.086511447 1.088445901 1.103466826 1.106144571 1.112203222 1.119471921 1.123432898 1.135443487 1.142755724 1.173917631 1.175229274 1.180810381 1.186210038 1.189673435 1.195757830 1.223646982 1.227228901 1.274156331 1.300923714 1.318934222 1.327873407 1.332600468 1.334269177 1.335664880 1.340685451 1.342754871 1.344879324 1.358614959 1.376890968 1.382813115 1.383903541 1.410928916 1.419533711 1.434642668 1.551425398 1.669162616 1.774662207</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">171</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33659879" y3="0.05728643" z3="-0.18972956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38254597" y3="0.16534577" z3="0.42121251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64542879" y3="0.44042428" z3="-0.33945245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73304033" y3="1.2375277" z3="-2.26457698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38779567" y3="0.44171319" z3="-1.18436257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73238183" y3="0.85007826" z3="-3.66416442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64151154" y3="1.75088333" z3="-3.14067966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39269897" y3="2.59742534" z3="-4.62451186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56574504" y3="1.25665129" z3="-4.377205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51464639" y3="2.93451589" z3="-5.18420796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92374905" y3="-0.48036775" z3="-3.44047263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09574862" y3="0.05676078" z3="-1.00255749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40097128" y3="-1.09127882" z3="-1.99873318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92904054" y3="-0.96503145" z3="-1.82568112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10730052" y3="-2.41327256" z3="-1.841265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13734796" y3="-3.61183146" z3="0.67387976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00430584" y3="-5.24062932" z3="-4.74551242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.22711575" y3="-4.98506817" z3="-3.70786299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83161771" y3="-4.3013909" z3="-1.08814046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79543169" y3="-4.57804299" z3="-2.85262978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54394405" y3="-5.07698238" z3="-3.25310515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.84713635" y3="-4.72948534" z3="-1.9390379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50511096" y3="-4.25099386" z3="-1.52639529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82900398" y3="-4.49542786" z3="-3.19661034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34129403" y3="-5.39002676" z3="-3.93079101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88353636" y3="-4.77076485" z3="-1.59846602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02449113" y3="-3.85779029" z3="0.23378454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1662517" y3="-3.65717396" z3="0.87955462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05035548" y3="-4.12351078" z3="0.44252439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1636089" y3="-3.52902761" z3="2.34698029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22554111" y3="-3.36187553" z3="5.14580676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3585577" y3="-3.74830152" z3="3.04793313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99977536" y3="-3.23150679" z3="3.07138257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02808626" y3="-3.14851261" z3="4.46049717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38857693" y3="-3.66685861" z3="4.43729996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2710748" y3="-3.99298777" z3="2.49739535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0409198" y3="-3.08654289" z3="2.5682053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10095527" y3="-2.93732854" z3="5.00122621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32537578" y3="-3.84970891" z3="4.97043511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24693085" y3="-3.30534393" z3="6.23774943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42392437" y3="-3.88826455" z3="-0.61959158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18211122" y3="-3.38192237" z3="-1.07039011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51982986" y3="0.25492075" z3="-4.70814725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.091577" y3="-1.73201206" z3="0.02996006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9122478" y3="-0.98444995" z3="1.19288736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85190894" y3="-0.32790029" z3="1.52006223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38403658" y3="0.55385993" z3="1.2144855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4689337" y3="1.44901705" z3="-0.4140854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97384969" y3="-0.69592195" z3="1.39397848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37393862" y3="1.75316647" z3="2.65368222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88028701" y3="-0.98408828" z3="2.09847266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64536713" y3="-0.3764098" z3="3.35883358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23178858" y3="0.75746776" z3="-1.24099768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3043472" y3="2.23982726" z3="-0.4134227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44982853" y3="1.93212638" z3="-0.57221682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00419341" y3="-1.05850125" z3="2.43477311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94496453" y3="-0.23003667" z3="1.15427648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85190527" y3="-1.539507" z3="0.69528306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42054322" y3="1.21873461" z3="3.61899771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55727744" y3="2.34889335" z3="2.64362128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22250555" y3="2.45888733" z3="2.60414484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77806693" y3="-0.83246832" z3="3.86262703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55544779" y3="-0.5575762" z3="3.9457175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4796299" y3="0.70724575" z3="3.24368278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83257924" y3="-0.69472421" z3="0.99437179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41169163" y3="-2.02382803" z3="0.86034021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75781162" y3="-2.66732877" z3="1.90375783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54108376" y3="-1.9683981" z3="3.08741739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01348294" y3="-0.67326387" z3="3.27808719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66761323" y3="-0.04350663" z3="2.22395611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52308518" y3="-2.52610193" z3="-0.10185934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36646132" y3="-3.67833448" z3="1.78418418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.67960619" y3="-2.56694167" z3="4.11203125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82554506" y3="-0.15916102" z3="4.22139574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00678398" y3="0.99004307" z3="2.33581094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79538899" y3="0.48430364" z3="-4.28172971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78066079" y3="-0.47899306" z3="-4.4521244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4408379" y3="-1.67529823" z3="-5.07109086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1565622" y3="-1.91504181" z3="-5.55150318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82183968" y3="-0.94901203" z3="-5.35846628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03423225" y3="1.41182401" z3="-3.75510277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79815786" y3="-0.32595763" z3="-4.09044592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45889216" y3="-2.71950495" z3="-5.20786706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.06701672" y3="-2.85898714" z3="-6.04786266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84194205" y3="-1.14204965" z3="-5.69477498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3374394" y3="-1.8673123" z3="5.04577567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31674872" y3="-3.71355166" z3="3.95303744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.24466023" y3="-3.62110679" z3="-5.98984086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45690647" y3="-2.62943106" z3="-4.52095779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07494206" y3="1.15538919" z3="-1.49048653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11785136" y3="1.54596524" z3="-2.47177452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44571219" y3="1.47628848" z3="-1.68765449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8608366" y3="2.13462681" z3="-2.81898058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16921915" y3="1.17763831" z3="-0.92274051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91888738" y3="2.37133202" z3="-2.96234013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58353351" y3="2.20865541" z3="-3.64167647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9167461" y3="2.49409679" z3="-3.81051949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86506387" y3="2.48238231" z3="-4.41771375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25218377" y3="2.99746741" z3="-4.72163307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41788275" y3="3.15491728" z3="-3.34533145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30482452" y3="3.56882387" z3="-4.13499811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23135349" y3="4.16491797" z3="-2.75814095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98852281" y3="5.49790164" z3="-2.99055369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05835775" y3="3.87543937" z3="-2.10791445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6302976" y3="6.25240606" z3="-2.52731731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08798672" y3="4.95471939" z3="-4.36936649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91430479" y3="5.9024343" z3="-3.81811446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23828797" y3="5.25321717" z3="-4.99120142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73642193" y3="6.96573095" z3="-4.0025428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48828709" y3="-2.21780321" z3="-0.28188409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4577596" y3="-3.00877183" z3="-1.04997768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00979152" y3="-2.60454486" z3="0.6081614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10985892" y3="-1.40115223" z3="-0.69540744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19592489" y3="-1.42757908" z3="-1.14454439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33851752" y3="-0.38599403" z3="-1.4865065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11776372" y3="-1.55042044" z3="-0.94636512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43993976" y3="-2.07838953" z3="-1.99740489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3366,.0573,-.1897;7.3825,.1653,.4212;6.6454,.4404,-.3395;4.733,1.2375,-2.2646;4.3878,.4417,-1.1844;2.7324,.8501,-3.6642;3.6415,1.7509,-3.1407;1.3927,2.5974,-4.6245;1.5657,1.2567,-4.3772;.5146,2.9345,-5.1842;2.9237,-.4804,-3.4405;3.0957,.0568,-1.0026;2.401,-1.0913,-1.9987;.929,-.965,-1.8257;3.1073,-2.4133,-1.8413;-.1373,-3.6118,.6739;.0043,-5.2406,-4.7455;-.2271,-4.9851,-3.7079;-.8316,-4.3014,-1.0881;.7954,-4.578,-2.8526;-1.5439,-5.077,-3.2531;-1.8471,-4.7295,-1.939;.5051,-4.251,-1.5264;1.829,-4.4954,-3.1966;-2.3413,-5.39,-3.9308;-2.8835,-4.7708,-1.5985;-1.0245,-3.8578,.2338;-2.1663,-3.6572,.8796;-3.0504,-4.1235,.4425;-2.1636,-3.529,2.347;-2.2255,-3.3619,5.1458;-3.3586,-3.7483,3.0479;-.9998,-3.2315,3.0714;-1.0281,-3.1485,4.4605;-3.3886,-3.6669,4.4373;-4.2711,-3.993,2.4974;-.0409,-3.0865,2.5682;-.101,-2.9373,5.0012;-4.3254,-3.8497,4.9704;-2.2469,-3.3053,6.2377;1.4239,-3.8883,-.6196;2.1821,-3.3819,-1.0704;.5198,.2549,-4.7081;-3.0916,-1.732,.03;-2.9122,-.9844,1.1929;-1.8519,-.3279,1.5201;-.384,.5539,1.2145;-.4689,1.449,-.4141;.9738,-.6959,1.394;-.3739,1.7532,2.6537;-3.8803,-.9841,2.0985;-3.6454,-.3764,3.3588;-.2318,.7575,-1.241;.3043,2.2398,-.4134;-1.4498,1.9321,-.5722;1.0042,-1.0585,2.4348;1.945,-.23,1.1543;.8519,-1.5395,.6953;-.4205,1.2187,3.619;.5573,2.3489,2.6436;-1.2225,2.4589,2.6041;-2.7781,-.8325,3.8626;-4.5554,-.5576,3.9457;-3.4796,.7072,3.2437;4.8326,-.6947,.9944;4.4117,-2.0238,.8603;3.7578,-2.6673,1.9038;3.5411,-1.9684,3.0874;4.0135,-.6733,3.2781;4.6676,-.0435,2.224;4.5231,-2.5261,-.1019;3.3665,-3.6783,1.7842;2.6796,-2.5669,4.112;3.8255,-.1592,4.2214;5.0068,.99,2.3358;-.7954,.4843,-4.2817;-1.7807,-.479,-4.4521;-1.4408,-1.6753,-5.0711;-.1566,-1.915,-5.5515;.8218,-.949,-5.3585;-1.0342,1.4118,-3.7551;-2.7982,-.326,-4.0904;-2.4589,-2.7195,-5.2079;.067,-2.859,-6.0479;1.8419,-1.142,-5.6948;2.3374,-1.8673,5.0458;2.3167,-3.7136,3.953;-2.2447,-3.6211,-5.9898;-3.4569,-2.6294,-4.521;7.0749,1.1554,-1.4905;6.1179,1.546,-2.4718;8.4457,1.4763,-1.6877;8.8608,2.1346,-2.819;9.1692,1.1776,-.9227;9.9189,2.3713,-2.9623;6.5835,2.2087,-3.6417;7.9167,2.4941,-3.8105;5.8651,2.4824,-4.4177;8.2522,2.9975,-4.7216;3.4179,3.1549,-3.3453;2.3048,3.5688,-4.135;4.2314,4.1649,-2.7581;3.9885,5.4979,-2.9906;5.0584,3.8754,-2.1079;4.6303,6.2524,-2.5273;2.088,4.9547,-4.3694;2.9143,5.9024,-3.8181;1.2383,5.2532,-4.9912;2.7364,6.9657,-4.0025;-4.4883,-2.2178,-.2819;-4.4578,-3.0088,-1.05;-5.0098,-2.6045,.6082;-5.1099,-1.4012,-.6954;-2.1959,-1.4276,-1.1445;-2.3385,-.386,-1.4865;-1.1178,-1.5504,-.9464;-2.4399,-2.0784,-1.9974;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412232295</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002503172833 0.000277439197 0.017046130865 0.005340312835</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030511513 -0.000449485 0.000110470 0.000134517 0.000269955 0.000389719 0.000397351 0.000509919 0.000609113 0.000791086 0.000913765 0.001109379 0.001269757 0.001280967 0.001368861 0.001385470 0.001648812 0.001750816 0.001804160 0.001934150 0.002141386 0.002484283 0.002553260 0.002688658 0.002811148 0.003115156 0.003237604 0.003427006 0.003840254 0.003945043 0.004334406 0.004725527 0.004795592 0.005037421 0.005838324 0.006033900 0.006252641 0.006521073 0.006783449 0.007490407 0.007911663 0.008101937 0.009141425 0.009434416 0.009897789 0.010694097 0.011022836 0.011532976 0.011668314 0.011986592 0.012848721 0.013163340 0.013952261 0.014384384 0.014929460 0.015316873 0.015573756 0.015922737 0.015975455 0.016831321 0.017277517 0.017660890 0.018845440 0.019329297 0.019657863 0.020521506 0.021155723 0.021336114 0.022325068 0.023077261 0.024972773 0.025904267 0.026548803 0.026832201 0.027358573 0.028918538 0.029340733 0.031401960 0.032991203 0.033278187 0.033669646 0.035383468 0.035783534 0.037308020 0.039279542 0.039757245 0.040510746 0.041762314 0.042630491 0.044383033 0.045184971 0.046646601 0.047354565 0.049140003 0.050254622 0.050714841 0.051000567 0.051203658 0.052471063 0.052500928 0.052842996 0.052928821 0.054439642 0.054649232 0.055447347 0.056132769 0.056461565 0.056499131 0.056978367 0.058303486 0.060249088 0.060574642 0.061425379 0.061882005 0.062956694 0.064159785 0.064983358 0.065687013 0.066281962 0.067623653 0.068843448 0.070090066 0.072553232 0.074276350 0.074370600 0.076085502 0.077667231 0.083335877 0.084978436 0.086813911 0.087052208 0.087691768 0.090307175 0.090738013 0.092944010 0.094575627 0.095188686 0.096293026 0.097232091 0.097728723 0.098719606 0.099558994 0.100181242 0.102279171 0.102699878 0.103087102 0.103353971 0.103910651 0.105042150 0.106713240 0.107311225 0.108702952 0.109049154 0.110205252 0.111916314 0.112314090 0.113192087 0.114815151 0.116108585 0.118819229 0.120570386 0.121262262 0.122248599 0.123918311 0.125204769 0.126216087 0.126857283 0.131652023 0.134866929 0.135548552 0.142433184 0.143437153 0.146812624 0.147148870 0.149600541 0.151970378 0.154454934 0.155616166 0.156597519 0.161065886 0.161700474 0.173241006 0.173760901 0.179104792 0.183903396 0.184996093 0.188902913 0.189963019 0.193824798 0.193906779 0.198254125 0.200023518 0.204892393 0.206764888 0.207088587 0.209739728 0.211290678 0.215312187 0.217281289 0.217644176 0.220400943 0.224886781 0.226203117 0.231769666 0.234826734 0.235355983 0.235702216 0.244455752 0.255688571 0.257038424 0.262745749 0.269592772 0.279828918 0.282857667 0.286144007 0.291377908 0.295853501 0.304178592 0.305557935 0.307105745 0.313276930 0.316402562 0.316793542 0.321894876 0.329217394 0.332364124 0.350203503 0.351820296 0.354659280 0.355409377 0.359818904 0.362674022 0.363114069 0.383748639 0.385850285 0.391552185 0.410410460 0.425238560 0.429792973 0.457852734 0.468530027 0.474251216 0.481695154 0.482781302 0.486944550 0.490331700 0.508505637 0.514737078 0.534933187 0.565999295 0.572696345 0.591763366 0.593406445 0.606246534 0.607512294 0.644326124 0.646344183 0.648503329 0.674188093 0.677324785 0.684884551 0.691396192 0.693071729 0.699335706 0.704130508 0.716853029 0.741175095 0.751160157 0.758300056 0.766737960 0.772323347 0.778742369 0.810423002 0.812597151 0.816501096 0.821568894 0.822335837 0.829500480 0.831312433 0.835531077 0.836675737 0.845117743 0.845920527 0.848128910 0.858228070 0.864506882 0.865367330 0.873139149 0.881023050 0.884269453 0.889279487 0.891807073 0.900543109 0.903795711 0.920375389 0.923317721 0.933026260 0.935038215 0.964877006 0.975633936 0.985620574 1.000911209 1.017435740 1.027253952 1.041250258 1.050194228 1.057260675 1.067800564 1.086511504 1.088447321 1.103467523 1.106145448 1.112204528 1.119473858 1.123451295 1.135444237 1.142755378 1.173920282 1.175270850 1.180814296 1.186210369 1.189673360 1.195758915 1.223674640 1.227250648 1.274159050 1.300923827 1.318934161 1.327874434 1.332607667 1.334342251 1.335667849 1.340751858 1.342777202 1.344879441 1.358643505 1.376910323 1.382822155 1.383903941 1.411374836 1.419545195 1.434701394 1.551426763 1.669247349 1.774666716</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">172</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33819789" y3="0.05330421" z3="-0.19117272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38493193" y3="0.16220985" z3="0.41734248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64676003" y3="0.43814974" z3="-0.34188633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73127972" y3="1.23598332" z3="-2.26372363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38809497" y3="0.43869745" z3="-1.18413483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73044358" y3="0.84867405" z3="-3.66267929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63849498" y3="1.7495471" z3="-3.13813702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38835024" y3="2.59548313" z3="-4.62034765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56358885" y3="1.25444439" z3="-4.37586973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51026897" y3="2.93227007" z3="-5.18010591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92288841" y3="-0.48156445" z3="-3.43955739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09669139" y3="0.05369823" z3="-1.0011824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40017332" y3="-1.09247459" z3="-1.9980929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92852586" y3="-0.96389558" z3="-1.8244935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10480594" y3="-2.41551907" z3="-1.84201647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13904999" y3="-3.61427084" z3="0.67245578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00167044" y3="-5.24295624" z3="-4.74606691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23214479" y3="-4.98827039" z3="-3.70814981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83457517" y3="-4.30516894" z3="-1.08823601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79055778" y3="-4.58073053" z3="-2.85369018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54897924" y3="-5.07968101" z3="-3.2529146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85089441" y3="-4.73297568" z3="-1.93846147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50129482" y3="-4.2537329" z3="-1.52740703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82401634" y3="-4.49877709" z3="-3.19876658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34671481" y3="-5.39171913" z3="-3.93052127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88894731" y3="-4.77037259" z3="-1.59714694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02633544" y3="-3.86037689" z3="0.23343823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16760121" y3="-3.65426127" z3="0.87889085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05310767" y3="-4.12006863" z3="0.44392755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16328489" y3="-3.52313934" z3="2.34626227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22241409" y3="-3.34907917" z3="5.14477999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35812186" y3="-3.73821397" z3="3.04876488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9976639" y3="-3.22687975" z3="3.06907393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02467101" y3="-3.14030658" z3="4.45801508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38675997" y3="-3.65346621" z3="4.43797366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27154724" y3="-3.9822356" z3="2.49945513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0392111" y3="-3.08445395" z3="2.56497275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09730264" y3="-2.92881233" z3="4.99742761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32367212" y3="-3.83293672" z3="4.97244551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24284843" y3="-3.28967051" z3="6.23654245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41870016" y3="-3.88861614" z3="-0.62147104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1784029" y3="-3.38391321" z3="-1.07285528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51987914" y3="0.25106797" z3="-4.70949721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08607564" y3="-1.72968909" z3="0.02666775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91007763" y3="-0.9807869" z3="1.18920292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8509039" y3="-0.32572245" z3="1.52021637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38123445" y3="0.555956" z3="1.21880748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46472939" y3="1.45199874" z3="-0.40901731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97770166" y3="-0.6917453" z3="1.39864764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37507547" y3="1.75199012" z3="2.6605611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8816703" y3="-0.97779451" z3="2.09046061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65040448" y3="-0.36782495" z3="3.35052402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22268153" y3="0.7624508" z3="-1.23501874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30757556" y3="2.24437905" z3="-0.40565904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44602869" y3="1.93136738" z3="-0.57030505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0085783" y3="-1.05532309" z3="2.43929718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94821265" y3="-0.2246038" z3="1.15961459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85650815" y3="-1.53455587" z3="0.69898169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42629453" y3="1.215252" z3="3.62434867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55661994" y3="2.34638641" z3="2.65598634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22248965" y3="2.45846769" z3="2.60962162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78470802" y3="-0.82307063" z3="3.85780899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56235487" y3="-0.54722554" z3="3.93549722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48391626" y3="0.71555526" z3="3.23380828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83608373" y3="-0.69935665" z3="0.99322076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41265693" y3="-2.02751181" z3="0.85806153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75967627" y3="-2.67128386" z3="1.90186281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54690368" y3="-1.97378774" z3="3.08744717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02195378" y3="-0.6798054" z3="3.27906113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67501132" y3="-0.0496329" z3="2.2244558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52043067" y3="-2.52835849" z3="-0.10584695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36545472" y3="-3.68121085" z3="1.7807691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68433272" y3="-2.57194555" z3="4.1112793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83581484" y3="-0.16649848" z3="4.2228677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01558807" y3="0.98330239" z3="2.3370636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79581467" y3="0.47688132" z3="-4.28316585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77900584" y3="-0.4886321" z3="-4.45663211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43544635" y3="-1.68332777" z3="-5.08073525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15053619" y3="-1.91964448" z3="-5.55828435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82554934" y3="-0.95103296" z3="-5.36331631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03691608" y3="1.40277754" z3="-3.75441473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79652524" y3="-0.33811746" z3="-4.09543768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45043755" y3="-2.7297246" z3="-5.21488103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07625474" y3="-2.86246099" z3="-6.05686631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84632959" y3="-1.14092426" z3="-5.69919272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34702445" y3="-1.87374644" z3="5.04724727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3141984" y3="-3.7164683" z3="3.94795536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23309723" y3="-3.63096705" z3="-5.99574635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44954465" y3="-2.64323569" z3="-4.52809608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0743863" y3="1.15517059" z3="-1.49247784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11553333" y3="1.54585065" z3="-2.47217062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44483559" y3="1.47760345" z3="-1.69094489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85821257" y3="2.13855931" z3="-2.82171157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16954982" y3="1.17790469" z3="-0.92762351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91585675" y3="2.37521041" z3="-2.96644734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57902018" y3="2.20992963" z3="-3.64182308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91230995" y3="2.49804874" z3="-3.8116325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85903188" y3="2.48275965" z3="-4.41695354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24621373" y3="3.00243081" z3="-4.72267005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4126006" y3="3.15335036" z3="-3.34001017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29844656" y3="3.56715821" z3="-4.12828974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2239722" y3="4.16345482" z3="-2.74989418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97793516" y3="5.49646056" z3="-2.97808725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05166254" y3="3.8738905" z3="-2.10052988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61726614" y3="6.25171194" z3="-2.5116054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07847763" y3="4.95324046" z3="-4.35842267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90258995" y3="5.90095709" z3="-3.80424265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2280084" y3="5.25193348" z3="-4.97911092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7224579" y3="6.96412273" z3="-3.98549667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48379704" y3="-2.21240597" z3="-0.2882416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45453557" y3="-3.00321285" z3="-1.0575299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00722241" y3="-2.59844474" z3="0.60148875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10386231" y3="-1.39427337" z3="-0.70164655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18696294" y3="-1.42729088" z3="-1.14570718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32645099" y3="-0.38532254" z3="-1.48848827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10967884" y3="-1.55165221" z3="-0.94466323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43051409" y3="-2.07821795" z3="-1.99901891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3382,.0533,-.1912;7.3849,.1622,.4173;6.6468,.4381,-.3419;4.7313,1.236,-2.2637;4.3881,.4387,-1.1841;2.7304,.8487,-3.6627;3.6385,1.7495,-3.1381;1.3884,2.5955,-4.6203;1.5636,1.2544,-4.3759;.5103,2.9323,-5.1801;2.9229,-.4816,-3.4396;3.0967,.0537,-1.0012;2.4002,-1.0925,-1.9981;.9285,-.9639,-1.8245;3.1048,-2.4155,-1.842;-.139,-3.6143,.6725;-.0017,-5.243,-4.7461;-.2321,-4.9883,-3.7081;-.8346,-4.3052,-1.0882;.7906,-4.5807,-2.8537;-1.549,-5.0797,-3.2529;-1.8509,-4.733,-1.9385;.5013,-4.2537,-1.5274;1.824,-4.4988,-3.1988;-2.3467,-5.3917,-3.9305;-2.8889,-4.7704,-1.5971;-1.0263,-3.8604,.2334;-2.1676,-3.6543,.8789;-3.0531,-4.1201,.4439;-2.1633,-3.5231,2.3463;-2.2224,-3.3491,5.1448;-3.3581,-3.7382,3.0488;-.9977,-3.2269,3.0691;-1.0247,-3.1403,4.458;-3.3868,-3.6535,4.438;-4.2715,-3.9822,2.4995;-.0392,-3.0845,2.565;-.0973,-2.9288,4.9974;-4.3237,-3.8329,4.9724;-2.2428,-3.2897,6.2365;1.4187,-3.8886,-.6215;2.1784,-3.3839,-1.0729;.5199,.2511,-4.7095;-3.0861,-1.7297,.0267;-2.9101,-.9808,1.1892;-1.8509,-.3257,1.5202;-.3812,.556,1.2188;-.4647,1.452,-.409;.9777,-.6917,1.3986;-.3751,1.752,2.6606;-3.8817,-.9778,2.0905;-3.6504,-.3678,3.3505;-.2227,.7625,-1.235;.3076,2.2444,-.4057;-1.446,1.9314,-.5703;1.0086,-1.0553,2.4393;1.9482,-.2246,1.1596;.8565,-1.5346,.699;-.4263,1.2153,3.6243;.5566,2.3464,2.656;-1.2225,2.4585,2.6096;-2.7847,-.8231,3.8578;-4.5624,-.5472,3.9355;-3.4839,.7156,3.2338;4.8361,-.6994,.9932;4.4127,-2.0275,.8581;3.7597,-2.6713,1.9019;3.5469,-1.9738,3.0874;4.022,-.6798,3.2791;4.675,-.0496,2.2245;4.5204,-2.5284,-.1058;3.3655,-3.6812,1.7808;2.6843,-2.5719,4.1113;3.8358,-.1665,4.2229;5.0156,.9833,2.3371;-.7958,.4769,-4.2832;-1.779,-.4886,-4.4566;-1.4354,-1.6833,-5.0807;-.1505,-1.9196,-5.5583;.8255,-.951,-5.3633;-1.0369,1.4028,-3.7544;-2.7965,-.3381,-4.0954;-2.4504,-2.7297,-5.2149;.0763,-2.8625,-6.0569;1.8463,-1.1409,-5.6992;2.347,-1.8737,5.0472;2.3142,-3.7165,3.948;-2.2331,-3.631,-5.9957;-3.4495,-2.6432,-4.5281;7.0744,1.1552,-1.4925;6.1155,1.5459,-2.4722;8.4448,1.4776,-1.6909;8.8582,2.1386,-2.8217;9.1695,1.1779,-.9276;9.9159,2.3752,-2.9664;6.579,2.2099,-3.6418;7.9123,2.498,-3.8116;5.859,2.4828,-4.417;8.2462,3.0024,-4.7227;3.4126,3.1534,-3.34;2.2984,3.5672,-4.1283;4.224,4.1635,-2.7499;3.9779,5.4965,-2.9781;5.0517,3.8739,-2.1005;4.6173,6.2517,-2.5116;2.0785,4.9532,-4.3584;2.9026,5.901,-3.8042;1.228,5.2519,-4.9791;2.7225,6.9641,-3.9855;-4.4838,-2.2124,-.2882;-4.4545,-3.0032,-1.0575;-5.0072,-2.5984,.6015;-5.1039,-1.3943,-.7016;-2.187,-1.4273,-1.1457;-2.3265,-.3853,-1.4885;-1.1097,-1.5517,-.9447;-2.4305,-2.0782,-1.999;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418554906</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003000136291 0.000313649184 0.025169805266 0.005337042225</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030512726 -0.000521933 -0.000038966 0.000144850 0.000292169 0.000389378 0.000402674 0.000511178 0.000608080 0.000788179 0.000915878 0.001105811 0.001261543 0.001279309 0.001369762 0.001385734 0.001688475 0.001759133 0.001813978 0.001944761 0.002139732 0.002488745 0.002563407 0.002691455 0.002810045 0.003120291 0.003233378 0.003434757 0.003839851 0.003947886 0.004333235 0.004724890 0.004799598 0.005061140 0.005836618 0.006048055 0.006252220 0.006530462 0.006785436 0.007491313 0.007959390 0.008102331 0.009143564 0.009452363 0.009902233 0.010700748 0.011021316 0.011537841 0.011683002 0.011983250 0.012852439 0.013165155 0.013960802 0.014383708 0.014931024 0.015315434 0.015574410 0.015922255 0.015977034 0.016832613 0.017279090 0.017661852 0.018843449 0.019349988 0.019670374 0.020530918 0.021155649 0.021339579 0.022334119 0.023078397 0.024972894 0.025906876 0.026558147 0.026831036 0.027375396 0.028928294 0.029345297 0.031401749 0.033021062 0.033278927 0.033669795 0.035467087 0.035783816 0.037313254 0.039282241 0.039755550 0.040516366 0.041762752 0.042636258 0.044383389 0.045194120 0.046654155 0.047369755 0.049140466 0.050256604 0.050720561 0.051007820 0.051208741 0.052471178 0.052500863 0.052843192 0.052932594 0.054447604 0.054651192 0.055447324 0.056148874 0.056468855 0.056499154 0.056982223 0.058313762 0.060249599 0.060575079 0.061428034 0.061896794 0.062963743 0.064181503 0.064987337 0.065701423 0.066283336 0.067630677 0.068848652 0.070098635 0.072553041 0.074280640 0.074378107 0.076085808 0.077709302 0.083355571 0.085020439 0.086817178 0.087065416 0.087694488 0.090309796 0.090741571 0.092945105 0.094575724 0.095188861 0.096293334 0.097232842 0.097729663 0.098724174 0.099572003 0.100182029 0.102280602 0.102701556 0.103088349 0.103353573 0.103910784 0.105064101 0.106713362 0.107311382 0.108717725 0.109051484 0.110214003 0.111944177 0.112315657 0.113217477 0.114812771 0.116109492 0.118826138 0.120571354 0.121273905 0.122258086 0.123924801 0.125211893 0.126216023 0.126857426 0.131654246 0.134866997 0.135548670 0.142432897 0.143449966 0.146819583 0.147149993 0.149600319 0.151974460 0.154455925 0.155668750 0.156596346 0.161109105 0.161703567 0.173241835 0.173761407 0.179128560 0.183904314 0.185010665 0.188904108 0.189966090 0.193827562 0.193916064 0.198255222 0.200024133 0.204907738 0.206765782 0.207094675 0.209739778 0.211291294 0.215371523 0.217306464 0.217648110 0.220407606 0.224888558 0.226203199 0.231774059 0.234826994 0.235359674 0.235724103 0.244459445 0.255692661 0.257047895 0.262756873 0.269598926 0.279857259 0.282857855 0.286144592 0.291383481 0.295871701 0.304179419 0.305571920 0.307129785 0.313317142 0.316420364 0.316850074 0.321896361 0.329234434 0.332379822 0.350228002 0.351820530 0.354669189 0.355411168 0.359828493 0.362685756 0.363118224 0.383823340 0.385855808 0.391554828 0.410413163 0.425239116 0.429808664 0.457859998 0.468532354 0.474415761 0.481708727 0.482784921 0.486955697 0.490331845 0.508526685 0.514756583 0.534947924 0.566004713 0.572699706 0.591771307 0.593415928 0.606248749 0.607567785 0.644345365 0.646349342 0.648561336 0.674194797 0.677332667 0.684897414 0.691409442 0.693077699 0.699337362 0.704135058 0.716855543 0.741175282 0.751161213 0.758308258 0.767014286 0.772350248 0.778744461 0.810436121 0.812597651 0.816569505 0.821571766 0.822341973 0.829555986 0.831322664 0.835534455 0.836686283 0.845135858 0.845937630 0.848143000 0.858229895 0.864512658 0.865369172 0.873153387 0.881058313 0.884271604 0.889279874 0.891807142 0.900549155 0.903809738 0.920379044 0.923318288 0.933030740 0.935039455 0.964878822 0.975637452 0.985620640 1.000911962 1.017437225 1.027287717 1.041250550 1.050196495 1.057260688 1.067816939 1.086511733 1.088448861 1.103468474 1.106149760 1.112205157 1.119481597 1.123487992 1.135445698 1.142791030 1.173922871 1.175312001 1.180817689 1.186212995 1.189675857 1.195760982 1.223723645 1.227338892 1.274168372 1.300924375 1.318935687 1.327877008 1.332611317 1.334405053 1.335669229 1.340824159 1.342788580 1.344879445 1.358655339 1.376944870 1.382840470 1.383904841 1.411919262 1.419551641 1.434810476 1.551430247 1.669471335 1.774744145</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">173</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.340835" y3="0.04888992" z3="-0.19348176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38853867" y3="0.15669547" z3="0.41201356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64908667" y3="0.43360515" z3="-0.3457188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73082641" y3="1.23512927" z3="-2.26298892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38928743" y3="0.43519754" z3="-1.18478952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72991332" y3="0.84775568" z3="-3.66184156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63657958" y3="1.74906039" z3="-3.13526086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38464232" y3="2.59503201" z3="-4.6145077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5626125" y3="1.25361117" z3="-4.37404538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50565604" y3="2.93180483" z3="-5.17296255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92390738" y3="-0.4828609" z3="-3.44106596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09818752" y3="0.04821707" z3="-1.00149488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40110982" y3="-1.09602368" z3="-2.00021819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92961962" y3="-0.9669514" z3="-1.82536104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10490544" y3="-2.41977151" z3="-1.84668714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13854802" y3="-3.61227456" z3="0.67128974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00589749" y3="-5.25358143" z3="-4.74438821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23564884" y3="-4.99573493" z3="-3.70681501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83635746" y3="-4.30566915" z3="-1.08759666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78794887" y3="-4.58607257" z3="-2.85442668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55166023" y3="-5.08728055" z3="-3.24924448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85309523" y3="-4.73653275" z3="-1.93546435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49978929" y3="-4.25633578" z3="-1.52837355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82117415" y3="-4.50474624" z3="-3.20056332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34883983" y3="-5.40371292" z3="-3.92456916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8887627" y3="-4.77829631" z3="-1.59274317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02668941" y3="-3.85811879" z3="0.23332182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16727618" y3="-3.65139633" z3="0.87922448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05287692" y3="-4.11761611" z3="0.44532733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16228103" y3="-3.51734657" z3="2.34621262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22004014" y3="-3.33656598" z3="5.14425463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35666581" y3="-3.73083285" z3="3.04985905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99680421" y3="-3.21885819" z3="3.06756131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02289589" y3="-3.12926446" z3="4.45630973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38468174" y3="-3.64258049" z3="4.43883968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27049226" y3="-3.97584795" z3="2.50170039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0387295" y3="-3.07748776" z3="2.56237586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09453339" y3="-2.9178738" z3="4.99497573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32142589" y3="-3.82026148" z3="4.97426412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23990457" y3="-3.27452113" z3="6.23587818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.420156" y3="-3.89213261" z3="-0.62362492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17826697" y3="-3.38723752" z3="-1.07602833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52094916" y3="0.24935933" z3="-4.71054707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08446143" y3="-1.72778341" z3="0.02255281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90995963" y3="-0.97794898" z3="1.18485395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8493818" y3="-0.32431626" z3="1.51690858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38063436" y3="0.5594859" z3="1.21982319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46002133" y3="1.45470287" z3="-0.40907227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97950436" y3="-0.68780678" z3="1.40300247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37980944" y3="1.75662047" z3="2.66091314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8833744" y3="-0.97280237" z3="2.08468986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65503084" y3="-0.35991468" z3="3.34374556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21522316" y3="0.76320985" z3="-1.23425109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30799738" y3="2.25024369" z3="-0.40432526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44297603" y3="1.93169048" z3="-0.57336759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01016973" y3="-1.04942413" z3="2.44418601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9505117" y3="-0.22110785" z3="1.16326881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8589571" y3="-1.5324797" z3="0.7051943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43491874" y3="1.22042303" z3="3.62501795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55200867" y3="2.35129063" z3="2.65932988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22718191" y3="2.46333563" z3="2.60622308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79053914" y3="-0.81385166" z3="3.85409928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56839238" y3="-0.53812368" z3="3.92681561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48845342" y3="0.72320189" z3="3.2247197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83924588" y3="-0.7047436" z3="0.99053741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41167151" y3="-2.03152362" z3="0.85443647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7580947" y3="-2.67454502" z3="1.89826648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54869244" y3="-1.97775622" z3="3.08444978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0284197" y3="-0.68557632" z3="3.27723594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68178023" y3="-0.05606107" z3="2.22249614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51798325" y3="-2.53210726" z3="-0.10908024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36185855" y3="-3.68337619" z3="1.77748585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6886636" y3="-2.57519457" z3="4.11095446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.846844" y3="-0.17329207" z3="4.22298786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02634787" y3="0.97562048" z3="2.3361086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79526117" y3="0.47224638" z3="-4.28486176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77647195" y3="-0.49435115" z3="-4.45946941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4315068" y3="-1.6875726" z3="-5.08178004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14632691" y3="-1.92067103" z3="-5.56252399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82805194" y3="-0.95102971" z3="-5.36487712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03799716" y3="1.39686302" z3="-3.75480688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79460727" y3="-0.34657541" z3="-4.09770141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44494379" y3="-2.73605754" z3="-5.22133699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08166324" y3="-2.86205812" z3="-6.06245137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84900058" y3="-1.13888154" z3="-5.70123139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35769517" y3="-1.87829957" z3="5.05096467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31637095" y3="-3.71798792" z3="3.94794342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22608794" y3="-3.63628843" z3="-6.00374304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44358451" y3="-2.65085069" z3="-4.53512926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07490085" y3="1.15222481" z3="-1.49590261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11458831" y3="1.54609183" z3="-2.47277718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44502597" y3="1.4733084" z3="-1.69686815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85635673" y3="2.13563295" z3="-2.82736489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17125198" y3="1.17154137" z3="-0.935742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91406835" y3="2.37194308" z3="-2.97393091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57609647" y3="2.21398582" z3="-3.6414342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90885942" y3="2.49970469" z3="-3.81395587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85494507" y3="2.49082762" z3="-4.41390168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24126071" y3="3.00719179" z3="-4.72422049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40766032" y3="3.15325465" z3="-3.3322336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29243168" y3="3.5672629" z3="-4.11878212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2170268" y3="4.16295749" z3="-2.73847288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9672958" y3="5.49640109" z3="-2.96058338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04594794" y3="3.8725014" z3="-2.09105518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60536732" y3="6.25083179" z3="-2.49186506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06880589" y3="4.95380114" z3="-4.3428746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89042064" y3="5.90151658" z3="-3.7844256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21723758" y3="5.25290702" z3="-4.96189062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7068492" y3="6.96528047" z3="-3.96032687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48070502" y3="-2.21066698" z3="-0.29572586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44848018" y3="-3.00162718" z3="-1.06388571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00684253" y3="-2.59647447" z3="0.59211597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09890039" y3="-1.39264374" z3="-0.7117128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18187986" y3="-1.42688893" z3="-1.14725822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31944148" y3="-0.38520116" z3="-1.49128828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10534335" y3="-1.55214482" z3="-0.94287949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42241336" y3="-2.07799936" z3="-2.00059817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,.0489,-.1935;7.3885,.1567,.412;6.6491,.4336,-.3457;4.7308,1.2351,-2.263;4.3893,.4352,-1.1848;2.7299,.8478,-3.6618;3.6366,1.7491,-3.1353;1.3846,2.595,-4.6145;1.5626,1.2536,-4.374;.5057,2.9318,-5.173;2.9239,-.4829,-3.4411;3.0982,.0482,-1.0015;2.4011,-1.096,-2.0002;.9296,-.967,-1.8254;3.1049,-2.4198,-1.8467;-.1385,-3.6123,.6713;-.0059,-5.2536,-4.7444;-.2356,-4.9957,-3.7068;-.8364,-4.3057,-1.0876;.7879,-4.5861,-2.8544;-1.5517,-5.0873,-3.2492;-1.8531,-4.7365,-1.9355;.4998,-4.2563,-1.5284;1.8212,-4.5047,-3.2006;-2.3488,-5.4037,-3.9246;-2.8888,-4.7783,-1.5927;-1.0267,-3.8581,.2333;-2.1673,-3.6514,.8792;-3.0529,-4.1176,.4453;-2.1623,-3.5173,2.3462;-2.22,-3.3366,5.1443;-3.3567,-3.7308,3.0499;-.9968,-3.2189,3.0676;-1.0229,-3.1293,4.4563;-3.3847,-3.6426,4.4388;-4.2705,-3.9758,2.5017;-.0387,-3.0775,2.5624;-.0945,-2.9179,4.995;-4.3214,-3.8203,4.9743;-2.2399,-3.2745,6.2359;1.4202,-3.8921,-.6236;2.1783,-3.3872,-1.076;.5209,.2494,-4.7105;-3.0845,-1.7278,.0226;-2.91,-.9779,1.1849;-1.8494,-.3243,1.5169;-.3806,.5595,1.2198;-.46,1.4547,-.4091;.9795,-.6878,1.403;-.3798,1.7566,2.6609;-3.8834,-.9728,2.0847;-3.655,-.3599,3.3437;-.2152,.7632,-1.2343;.308,2.2502,-.4043;-1.443,1.9317,-.5734;1.0102,-1.0494,2.4442;1.9505,-.2211,1.1633;.859,-1.5325,.7052;-.4349,1.2204,3.625;.552,2.3513,2.6593;-1.2272,2.4633,2.6062;-2.7905,-.8139,3.8541;-4.5684,-.5381,3.9268;-3.4885,.7232,3.2247;4.8392,-.7047,.9905;4.4117,-2.0315,.8544;3.7581,-2.6745,1.8983;3.5487,-1.9778,3.0844;4.0284,-.6856,3.2772;4.6818,-.0561,2.2225;4.518,-2.5321,-.1091;3.3619,-3.6834,1.7775;2.6887,-2.5752,4.111;3.8468,-.1733,4.223;5.0263,.9756,2.3361;-.7953,.4722,-4.2849;-1.7765,-.4944,-4.4595;-1.4315,-1.6876,-5.0818;-.1463,-1.9207,-5.5625;.8281,-.951,-5.3649;-1.038,1.3969,-3.7548;-2.7946,-.3466,-4.0977;-2.4449,-2.7361,-5.2213;.0817,-2.8621,-6.0625;1.849,-1.1389,-5.7012;2.3577,-1.8783,5.051;2.3164,-3.718,3.9479;-2.2261,-3.6363,-6.0037;-3.4436,-2.6509,-4.5351;7.0749,1.1522,-1.4959;6.1146,1.5461,-2.4728;8.445,1.4733,-1.6969;8.8564,2.1356,-2.8274;9.1713,1.1715,-.9357;9.9141,2.3719,-2.9739;6.5761,2.214,-3.6414;7.9089,2.4997,-3.814;5.8549,2.4908,-4.4139;8.2413,3.0072,-4.7242;3.4077,3.1533,-3.3322;2.2924,3.5673,-4.1188;4.217,4.163,-2.7385;3.9673,5.4964,-2.9606;5.0459,3.8725,-2.0911;4.6054,6.2508,-2.4919;2.0688,4.9538,-4.3429;2.8904,5.9015,-3.7844;1.2172,5.2529,-4.9619;2.7068,6.9653,-3.9603;-4.4807,-2.2107,-.2957;-4.4485,-3.0016,-1.0639;-5.0068,-2.5965,.5921;-5.0989,-1.3926,-.7117;-2.1819,-1.4269,-1.1473;-2.3194,-.3852,-1.4913;-1.1053,-1.5521,-.9429;-2.4224,-2.078,-2.0006;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418011033</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002454529556 0.000315476483 0.018211544462 0.005330306615</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030515269 -0.000485386 -0.000043623 0.000147836 0.000292208 0.000390153 0.000413480 0.000512809 0.000612278 0.000791009 0.000918246 0.001105787 0.001261172 0.001279368 0.001369887 0.001386605 0.001698266 0.001769173 0.001819534 0.001955738 0.002141445 0.002489474 0.002573739 0.002697263 0.002811491 0.003128433 0.003236634 0.003435260 0.003840342 0.003953617 0.004336190 0.004725940 0.004805727 0.005068300 0.005837521 0.006064402 0.006253348 0.006546565 0.006785409 0.007490948 0.007984727 0.008102249 0.009145560 0.009465467 0.009903071 0.010701989 0.011023838 0.011541652 0.011689290 0.011986211 0.012854268 0.013164833 0.013965130 0.014383852 0.014930498 0.015316225 0.015574680 0.015923949 0.015979083 0.016834193 0.017279079 0.017665693 0.018845778 0.019368128 0.019682927 0.020540889 0.021156083 0.021345546 0.022343577 0.023080794 0.024972830 0.025907064 0.026572614 0.026831104 0.027379545 0.028940351 0.029346533 0.031401666 0.033055134 0.033279214 0.033670292 0.035547067 0.035783938 0.037314579 0.039284239 0.039755717 0.040525191 0.041762794 0.042636545 0.044383483 0.045207390 0.046656875 0.047381957 0.049141103 0.050257103 0.050721783 0.051012986 0.051211679 0.052471198 0.052500929 0.052843417 0.052935629 0.054449442 0.054653498 0.055447370 0.056156245 0.056471570 0.056499029 0.056984147 0.058322886 0.060250045 0.060575038 0.061429656 0.061911486 0.062978385 0.064202006 0.064994537 0.065706313 0.066284306 0.067638703 0.068848107 0.070105759 0.072553256 0.074282973 0.074387813 0.076085942 0.077735217 0.083363111 0.085041938 0.086817209 0.087073428 0.087703457 0.090311121 0.090742292 0.092946903 0.094575782 0.095188945 0.096293376 0.097233126 0.097729669 0.098725874 0.099579777 0.100182127 0.102283202 0.102702021 0.103090353 0.103353838 0.103910921 0.105065956 0.106713650 0.107311388 0.108727238 0.109055310 0.110214873 0.111982468 0.112316266 0.113246971 0.114813455 0.116114271 0.118831307 0.120571354 0.121282803 0.122259805 0.123931797 0.125217447 0.126215866 0.126858012 0.131656031 0.134867312 0.135551021 0.142437047 0.143469358 0.146822669 0.147150652 0.149599934 0.151974338 0.154456309 0.155710431 0.156595195 0.161143555 0.161705287 0.173244506 0.173761726 0.179151031 0.183905771 0.185021211 0.188908078 0.189968932 0.193832873 0.193920082 0.198257883 0.200024038 0.204922108 0.206765821 0.207096109 0.209739978 0.211291777 0.215418548 0.217329508 0.217648729 0.220411242 0.224889954 0.226203199 0.231781284 0.234827059 0.235364026 0.235734204 0.244463123 0.255696723 0.257052001 0.262769535 0.269600099 0.279886419 0.282858574 0.286144553 0.291386321 0.295902440 0.304179457 0.305575044 0.307139255 0.313336964 0.316427025 0.316912637 0.321897099 0.329250624 0.332386211 0.350266022 0.351820980 0.354674616 0.355413331 0.359831161 0.362690330 0.363131250 0.383891707 0.385857268 0.391555868 0.410412988 0.425239388 0.429816039 0.457860006 0.468534066 0.474569700 0.481709200 0.482788477 0.486957389 0.490332391 0.508556905 0.514777874 0.534960923 0.566009960 0.572700371 0.591773865 0.593420655 0.606249633 0.607602457 0.644347796 0.646353916 0.648597828 0.674196094 0.677334477 0.684905020 0.691419325 0.693079395 0.699338243 0.704140459 0.716855962 0.741175353 0.751161952 0.758315586 0.767191831 0.772368106 0.778745021 0.810447282 0.812598097 0.816644107 0.821573230 0.822343292 0.829618148 0.831326675 0.835538509 0.836687364 0.845141661 0.845962029 0.848150568 0.858233475 0.864513401 0.865372603 0.873160378 0.881076595 0.884274620 0.889279910 0.891807188 0.900555206 0.903817743 0.920379056 0.923318386 0.933036288 0.935039423 0.964884331 0.975640282 0.985621099 1.000912508 1.017442800 1.027309659 1.041252043 1.050196693 1.057260732 1.067847286 1.086511867 1.088449989 1.103469475 1.106151057 1.112205246 1.119491536 1.123522160 1.135447405 1.142811769 1.173923294 1.175348240 1.180818877 1.186216801 1.189677189 1.195766137 1.223763490 1.227436348 1.274173581 1.300924616 1.318935938 1.327898692 1.332612048 1.334452660 1.335669369 1.340839779 1.342792923 1.344879496 1.358655301 1.376985754 1.382858466 1.383906936 1.412343695 1.419552746 1.434849381 1.551432700 1.669738237 1.774784734</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">174</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34334408" y3="0.0444816" z3="-0.19502511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3913942" y3="0.15534406" z3="0.4090761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65084268" y3="0.43212001" z3="-0.34760733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72940509" y3="1.23342243" z3="-2.2618835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39031577" y3="0.43106813" z3="-1.1848573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72795372" y3="0.84623503" z3="-3.6599354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6335783" y3="1.74756773" z3="-3.13211227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37951751" y3="2.59315839" z3="-4.60834183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55981579" y3="1.25145532" z3="-4.37138433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50002794" y3="2.9298407" z3="-5.16593461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92370998" y3="-0.48425419" z3="-3.44093007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10007003" y3="0.04283388" z3="-1.00075241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4013875" y3="-1.09907769" z3="-2.00089981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93014809" y3="-0.96798258" z3="-1.82553642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10340133" y3="-2.42402977" z3="-1.84953865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13970443" y3="-3.61675465" z3="0.67206535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01309204" y3="-5.25328361" z3="-4.74447608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24098716" y3="-4.99820288" z3="-3.70619953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83783523" y3="-4.31178148" z3="-1.08594337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78382628" y3="-4.58977601" z3="-2.8541339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55660622" y3="-5.09014005" z3="-3.24802788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85569948" y3="-4.74186441" z3="-1.93337222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49718477" y3="-4.26089812" z3="-1.52778608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81592257" y3="-4.50663352" z3="-3.20132908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35699488" y3="-5.40179408" z3="-3.92397942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89305122" y3="-4.77968537" z3="-1.58963362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02784449" y3="-3.8625979" z3="0.23454604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16847269" y3="-3.64925941" z3="0.87943642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0559445" y3="-4.11416656" z3="0.44710348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16305485" y3="-3.51189835" z3="2.34634954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22057951" y3="-3.32317214" z3="5.14400374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35829626" y3="-3.71999076" z3="3.0504409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99643808" y3="-3.21510055" z3="3.06714312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02264232" y3="-3.12125559" z3="4.45563209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38607425" y3="-3.628029" z3="4.43923576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27280859" y3="-3.96389187" z3="2.50277639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03764932" y3="-3.07810566" z3="2.56184041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09432217" y3="-2.91006251" z3="4.99368678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32320331" y3="-3.80204994" z3="4.97499305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24036985" y3="-3.25798983" z3="6.23548487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41611405" y3="-3.89373234" z3="-0.62438278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1756954" y3="-3.3913274" z3="-1.07814066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52003525" y3="0.24609123" z3="-4.71052542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07877185" y3="-1.72589542" z3="0.02000412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90575483" y3="-0.97403345" z3="1.18131452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84531862" y3="-0.32253585" z3="1.51563345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37583711" y3="0.56034538" z3="1.21994954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45489127" y3="1.45438294" z3="-0.4092375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98394152" y3="-0.68610049" z3="1.40477957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3763263" y3="1.75653427" z3="2.66157604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88175555" y3="-0.96513897" z3="2.07776943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65640081" y3="-0.34952423" z3="3.33593594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20782571" y3="0.7639227" z3="-1.23326574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31412157" y3="2.24985946" z3="-0.40423796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43746135" y3="1.93000751" z3="-0.57500893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01407374" y3="-1.04712458" z3="2.44628432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95426376" y3="-0.21930076" z3="1.1650618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86395422" y3="-1.53103537" z3="0.70759984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43315492" y3="1.2192744" z3="3.62479597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55584545" y3="2.35017845" z3="2.66251545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22286819" y3="2.46382303" z3="2.60623818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79471663" y3="-0.80403769" z3="3.85047179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57206439" y3="-0.52439774" z3="3.91601081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48723826" y3="0.73307534" z3="3.21490333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84396109" y3="-0.71064083" z3="0.98895995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41261665" y3="-2.03604309" z3="0.85101838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75932656" y3="-2.67939026" z3="1.89487847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55475552" y3="-1.98455437" z3="3.08359688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03838064" y3="-0.69415847" z3="3.27788924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69131908" y3="-0.0642544" z3="2.22304012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51354532" y3="-2.53438123" z3="-0.11523113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35828976" y3="-3.68650878" z3="1.77138138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69148646" y3="-2.58068974" z3="4.1080286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85841641" y3="-0.18284662" z3="4.2238221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03779054" y3="0.96643096" z3="2.33757592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79728518" y3="0.46566833" z3="-4.28554198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77669626" y3="-0.50294086" z3="-4.46360931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.427798" y3="-1.69485367" z3="-5.08926222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1411928" y3="-1.92470556" z3="-5.56614966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83086942" y3="-0.95290295" z3="-5.36765273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04253748" y3="1.38899581" z3="-3.75425626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79530684" y3="-0.35731778" z3="-4.10350705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43837115" y3="-2.74536666" z3="-5.22617209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08972791" y3="-2.86525259" z3="-6.06647911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85271928" y3="-1.13806147" z3="-5.70289426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36379372" y3="-1.88441913" z3="5.04858626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31084616" y3="-3.72131095" z3="3.94041479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21545654" y3="-3.64618578" z3="-6.00616587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43935967" y3="-2.66282755" z3="-4.54184148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07446376" y3="1.15403661" z3="-1.49668687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11245112" y3="1.54746299" z3="-2.47217795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44396032" y3="1.47922267" z3="-1.69776628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.853198" y3="2.14535188" z3="-2.8269808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17134648" y3="1.17718313" z3="-0.93790942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91021576" y3="2.38386348" z3="-2.97389462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5715999" y3="2.21805311" z3="-3.63989844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90397948" y3="2.50847812" z3="-3.81237217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84903637" y3="2.49388689" z3="-4.41152389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23457786" y3="3.01724059" z3="-4.7220652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40235159" y3="3.15150203" z3="-3.32597585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28562447" y3="3.56559798" z3="-4.11042539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21039658" y3="4.16085806" z3="-2.73059391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95753072" y3="5.49431767" z3="-2.94872532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04042494" y3="3.87039602" z3="-2.0845496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59402956" y3="6.24899963" z3="-2.47794143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05886101" y3="4.95220323" z3="-4.33048897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87898943" y3="5.89969771" z3="-3.77031674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20628544" y3="5.25123342" z3="-4.94813316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69308231" y3="6.96333868" z3="-3.94321624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47650404" y3="-2.20500508" z3="-0.30031348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44541257" y3="-2.99731739" z3="-1.0675979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00568364" y3="-2.58787939" z3="0.58714194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09165936" y3="-1.38564131" z3="-0.71843547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17416288" y3="-1.42838561" z3="-1.1495226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3112091" y3="-0.38778327" z3="-1.49630853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0977381" y3="-1.55299387" z3="-0.94419189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41504665" y3="-2.08184308" z3="-2.00183694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3433,.0445,-.195;7.3914,.1553,.4091;6.6508,.4321,-.3476;4.7294,1.2334,-2.2619;4.3903,.4311,-1.1849;2.728,.8462,-3.6599;3.6336,1.7476,-3.1321;1.3795,2.5932,-4.6083;1.5598,1.2515,-4.3714;.5,2.9298,-5.1659;2.9237,-.4843,-3.4409;3.1001,.0428,-1.0008;2.4014,-1.0991,-2.0009;.9301,-.968,-1.8255;3.1034,-2.424,-1.8495;-.1397,-3.6168,.6721;-.0131,-5.2533,-4.7445;-.241,-4.9982,-3.7062;-.8378,-4.3118,-1.0859;.7838,-4.5898,-2.8541;-1.5566,-5.0901,-3.248;-1.8557,-4.7419,-1.9334;.4972,-4.2609,-1.5278;1.8159,-4.5066,-3.2013;-2.357,-5.4018,-3.924;-2.8931,-4.7797,-1.5896;-1.0278,-3.8626,.2345;-2.1685,-3.6493,.8794;-3.0559,-4.1142,.4471;-2.1631,-3.5119,2.3463;-2.2206,-3.3232,5.144;-3.3583,-3.72,3.0504;-.9964,-3.2151,3.0671;-1.0226,-3.1213,4.4556;-3.3861,-3.628,4.4392;-4.2728,-3.9639,2.5028;-.0376,-3.0781,2.5618;-.0943,-2.9101,4.9937;-4.3232,-3.802,4.975;-2.2404,-3.258,6.2355;1.4161,-3.8937,-.6244;2.1757,-3.3913,-1.0781;.52,.2461,-4.7105;-3.0788,-1.7259,.02;-2.9058,-.974,1.1813;-1.8453,-.3225,1.5156;-.3758,.5603,1.2199;-.4549,1.4544,-.4092;.9839,-.6861,1.4048;-.3763,1.7565,2.6616;-3.8818,-.9651,2.0778;-3.6564,-.3495,3.3359;-.2078,.7639,-1.2333;.3141,2.2499,-.4042;-1.4375,1.93,-.575;1.0141,-1.0471,2.4463;1.9543,-.2193,1.1651;.864,-1.531,.7076;-.4332,1.2193,3.6248;.5558,2.3502,2.6625;-1.2229,2.4638,2.6062;-2.7947,-.804,3.8505;-4.5721,-.5244,3.916;-3.4872,.7331,3.2149;4.844,-.7106,.989;4.4126,-2.036,.851;3.7593,-2.6794,1.8949;3.5548,-1.9846,3.0836;4.0384,-.6942,3.2779;4.6913,-.0643,2.223;4.5135,-2.5344,-.1152;3.3583,-3.6865,1.7714;2.6915,-2.5807,4.108;3.8584,-.1828,4.2238;5.0378,.9664,2.3376;-.7973,.4657,-4.2855;-1.7767,-.5029,-4.4636;-1.4278,-1.6949,-5.0893;-.1412,-1.9247,-5.5661;.8309,-.9529,-5.3677;-1.0425,1.389,-3.7543;-2.7953,-.3573,-4.1035;-2.4384,-2.7454,-5.2262;.0897,-2.8653,-6.0665;1.8527,-1.1381,-5.7029;2.3638,-1.8844,5.0486;2.3108,-3.7213,3.9404;-2.2155,-3.6462,-6.0062;-3.4394,-2.6628,-4.5418;7.0745,1.154,-1.4967;6.1125,1.5475,-2.4722;8.444,1.4792,-1.6978;8.8532,2.1454,-2.827;9.1713,1.1772,-.9379;9.9102,2.3839,-2.9739;6.5716,2.2181,-3.6399;7.904,2.5085,-3.8124;5.849,2.4939,-4.4115;8.2346,3.0172,-4.7221;3.4024,3.1515,-3.326;2.2856,3.5656,-4.1104;4.2104,4.1609,-2.7306;3.9575,5.4943,-2.9487;5.0404,3.8704,-2.0845;4.594,6.249,-2.4779;2.0589,4.9522,-4.3305;2.879,5.8997,-3.7703;1.2063,5.2512,-4.9481;2.6931,6.9633,-3.9432;-4.4765,-2.205,-.3003;-4.4454,-2.9973,-1.0676;-5.0057,-2.5879,.5871;-5.0917,-1.3856,-.7184;-2.1742,-1.4284,-1.1495;-2.3112,-.3878,-1.4963;-1.0977,-1.553,-.9442;-2.415,-2.0818,-2.0018;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417987530</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002418505580 0.000311987435 0.019045798981 0.005334610727</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030517472 -0.000524501 -0.000043594 0.000164948 0.000294017 0.000390117 0.000419338 0.000514287 0.000611907 0.000793273 0.000919345 0.001105759 0.001261210 0.001279349 0.001370044 0.001386748 0.001698191 0.001768162 0.001825125 0.001962430 0.002142946 0.002489414 0.002577744 0.002704876 0.002816920 0.003132667 0.003237208 0.003435275 0.003841521 0.003955421 0.004337689 0.004728621 0.004814411 0.005071393 0.005842721 0.006072892 0.006261110 0.006560200 0.006785398 0.007494689 0.007998305 0.008104509 0.009145849 0.009481033 0.009903136 0.010702539 0.011022968 0.011545822 0.011694775 0.011989967 0.012856411 0.013165808 0.013965529 0.014384255 0.014929943 0.015317173 0.015575408 0.015926232 0.015981642 0.016833685 0.017279787 0.017670536 0.018849626 0.019383087 0.019701383 0.020556024 0.021157227 0.021352904 0.022352889 0.023084749 0.024973878 0.025907101 0.026595817 0.026831600 0.027379687 0.028952038 0.029346898 0.031401586 0.033102947 0.033280664 0.033670157 0.035670509 0.035784198 0.037316728 0.039286663 0.039755799 0.040534796 0.041762981 0.042638715 0.044384207 0.045211687 0.046656755 0.047396687 0.049141741 0.050258897 0.050721660 0.051016781 0.051212841 0.052471190 0.052501075 0.052843738 0.052936543 0.054449222 0.054656034 0.055447289 0.056160242 0.056471693 0.056498892 0.056985225 0.058337440 0.060250910 0.060575028 0.061429652 0.061923007 0.063006277 0.064232546 0.065001853 0.065720351 0.066285039 0.067647151 0.068850197 0.070110481 0.072553796 0.074283460 0.074399529 0.076088008 0.077746660 0.083365432 0.085053587 0.086817187 0.087077226 0.087721559 0.090312332 0.090742131 0.092947419 0.094575921 0.095189097 0.096293389 0.097233333 0.097729681 0.098726221 0.099583285 0.100182914 0.102286531 0.102702055 0.103092708 0.103355290 0.103911039 0.105065711 0.106715298 0.107311411 0.108728117 0.109062670 0.110215029 0.112028070 0.112316264 0.113272281 0.114815023 0.116118786 0.118835203 0.120572070 0.121298947 0.122259832 0.123940706 0.125222585 0.126215592 0.126859015 0.131656839 0.134867485 0.135558932 0.142450806 0.143492666 0.146823793 0.147151153 0.149600913 0.151976473 0.154456982 0.155749961 0.156593595 0.161173446 0.161705160 0.173248853 0.173761793 0.179168399 0.183907079 0.185029179 0.188914773 0.189971502 0.193842196 0.193922696 0.198261730 0.200023902 0.204936550 0.206767258 0.207096146 0.209740444 0.211295673 0.215443554 0.217346240 0.217650577 0.220415437 0.224895203 0.226203199 0.231789467 0.234827540 0.235366923 0.235735823 0.244466960 0.255699310 0.257054064 0.262779084 0.269601452 0.279922343 0.282860833 0.286145431 0.291389775 0.295937124 0.304179404 0.305574915 0.307148192 0.313345706 0.316429012 0.316973344 0.321897429 0.329259590 0.332390842 0.350314441 0.351821768 0.354683365 0.355418804 0.359832337 0.362697761 0.363158697 0.383949537 0.385857384 0.391556419 0.410412893 0.425239455 0.429819469 0.457860020 0.468534878 0.474808363 0.481709439 0.482796179 0.486957717 0.490333155 0.508588654 0.514802127 0.534971961 0.566013633 0.572700352 0.591777116 0.593425453 0.606250111 0.607622796 0.644376746 0.646355966 0.648622263 0.674196364 0.677337160 0.684906476 0.691423835 0.693079740 0.699339430 0.704146121 0.716856036 0.741175828 0.751162818 0.758321421 0.767306529 0.772379694 0.778745406 0.810451450 0.812602460 0.816690048 0.821573667 0.822344075 0.829666674 0.831327631 0.835542822 0.836688228 0.845143204 0.845981958 0.848157919 0.858236584 0.864514035 0.865377813 0.873162818 0.881082381 0.884278470 0.889281164 0.891808805 0.900561849 0.903820093 0.920385562 0.923318400 0.933038336 0.935039488 0.964893928 0.975641711 0.985622475 1.000912543 1.017451796 1.027321267 1.041255022 1.050197202 1.057260837 1.067900497 1.086511990 1.088451045 1.103470445 1.106154200 1.112205252 1.119502923 1.123547256 1.135448947 1.142863601 1.173923332 1.175381073 1.180819669 1.186220461 1.189688633 1.195773434 1.223785630 1.227553288 1.274184224 1.300924547 1.318935837 1.327953304 1.332612137 1.334483682 1.335669278 1.340846698 1.342796366 1.344879432 1.358677318 1.377038322 1.382866463 1.383925222 1.412637038 1.419552869 1.434893914 1.551434305 1.670112513 1.774795405</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">175</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34443992" y3="0.0427481" z3="-0.19555573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39172842" y3="0.15907785" z3="0.40988954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65078283" y3="0.43471454" z3="-0.34680227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72811618" y3="1.23289923" z3="-2.26094167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3906489" y3="0.42820914" z3="-1.18517908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72767571" y3="0.8430045" z3="-3.65992912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63130451" y3="1.74564473" z3="-3.1306322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37599317" y3="2.58852898" z3="-4.6063366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55878505" y3="1.24703278" z3="-4.37060963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4958132" y3="2.92416006" z3="-5.16359246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92605325" y3="-0.48754951" z3="-3.44244411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10109657" y3="0.03706549" z3="-1.00153317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40244967" y3="-1.10354477" z3="-2.0032179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93118913" y3="-0.97187682" z3="-1.82845459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10337552" y3="-2.42902563" z3="-1.85231756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14239793" y3="-3.61834869" z3="0.67363871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01895552" y3="-5.25767158" z3="-4.74316016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24672787" y3="-5.0004199" z3="-3.70507218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8426838" y3="-4.31118647" z3="-1.08463262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77806249" y3="-4.59030659" z3="-2.85459695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56197531" y3="-5.09249232" z3="-3.24510937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86082726" y3="-4.74270873" z3="-1.93057424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49238113" y3="-4.26082646" z3="-1.52803577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81085219" y3="-4.50911657" z3="-3.20284046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35969529" y3="-5.40951879" z3="-3.91907019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89597755" y3="-4.78513336" z3="-1.58556053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03114966" y3="-3.86243524" z3="0.23618812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17106016" y3="-3.64699574" z3="0.88077997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05905972" y3="-4.11011531" z3="0.44840134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16555382" y3="-3.50744232" z3="2.34732486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22275671" y3="-3.31250726" z3="5.14453201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36144919" y3="-3.7098155" z3="3.05168449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99822799" y3="-3.21344035" z3="3.06764675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0239776" y3="-3.11687568" z3="4.45595699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3892089" y3="-3.61447873" z3="4.44023233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27666669" y3="-3.95139511" z3="2.50443377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03912387" y3="-3.08094634" z3="2.56227736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09418011" y3="-2.90915183" z3="4.99372103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3273393" y3="-3.78300414" z3="4.97626578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24256996" y3="-3.24469011" z3="6.23584345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41386569" y3="-3.89536614" z3="-0.62526307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17316839" y3="-3.39403199" z3="-1.07951832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52069286" y3="0.24058566" z3="-4.71113275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07678084" y3="-1.72189145" z3="0.01771722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90329215" y3="-0.96898859" z3="1.17826001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84128626" y3="-0.31940758" z3="1.5127616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36846656" y3="0.55883438" z3="1.21876179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44442286" y3="1.45516858" z3="-0.40954789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98757532" y3="-0.69229297" z3="1.40347403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36469771" y3="1.75395925" z3="2.66142551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88031856" y3="-0.95645662" z3="2.07395776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65499305" y3="-0.33807232" z3="3.33089859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20373865" y3="0.7629737" z3="-1.23528827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32671059" y3="2.24715106" z3="-0.40523374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42524059" y3="1.93668661" z3="-0.5726686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01564097" y3="-1.0546594" z3="2.44470472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95978233" y3="-0.22748474" z3="1.16585256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86622837" y3="-1.53621008" z3="0.70504653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42367034" y3="1.21622201" z3="3.62443721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56977217" y3="2.34412419" z3="2.66251764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20858171" y3="2.46459088" z3="2.6068191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79450881" y3="-0.79267358" z3="3.84744599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57164459" y3="-0.50948934" z3="3.91099624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48364318" y3="0.74373479" z3="3.20701718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84618763" y3="-0.71517111" z3="0.98703387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41359929" y3="-2.03989133" z3="0.84669579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76002484" y3="-2.6847331" z3="1.88939936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55599704" y3="-1.99209217" z3="3.07890364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04246989" y3="-0.70306894" z3="3.27641659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69564285" y3="-0.07162026" z3="2.22266973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51530585" y3="-2.53691806" z3="-0.11900911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35928655" y3="-3.69127601" z3="1.76525831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69437753" y3="-2.58936136" z3="4.10423062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86612993" y3="-0.19428639" z3="4.2252484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0450937" y3="0.9581284" z3="2.34020013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79695121" y3="0.45884615" z3="-4.28780019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77508924" y3="-0.51004677" z3="-4.46692311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42552721" y3="-1.70093294" z3="-5.09144996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13882471" y3="-1.92954821" z3="-5.56989112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83246275" y3="-0.95733012" z3="-5.36745418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04343555" y3="1.38135114" z3="-3.75593448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79421801" y3="-0.36589839" z3="-4.10673908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43585712" y3="-2.75178937" z3="-5.23428361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0932743" y3="-2.86912143" z3="-6.0717194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85457473" y3="-1.14164917" z3="-5.70213722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36960771" y3="-1.89509523" z3="5.04853873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31484592" y3="-3.72895942" z3="3.93637595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21078141" y3="-3.65304819" z3="-6.01370658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43829099" y3="-2.66743601" z3="-4.55352056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07278468" y3="1.1596146" z3="-1.49448631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11028289" y3="1.55114163" z3="-2.4701537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44109398" y3="1.48989738" z3="-1.69394025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.848707" y3="2.15883227" z3="-2.82189242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16898797" y3="1.19012193" z3="-0.93365118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90500882" y3="2.40251215" z3="-2.96716449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56801653" y3="2.22497618" z3="-3.63665915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89919341" y3="2.51976192" z3="-3.80772548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84527331" y3="2.49925501" z3="-4.40859523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22871459" y3="3.03196252" z3="-4.71627932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39683361" y3="3.14968584" z3="-3.32195016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27990371" y3="3.56233198" z3="-4.10673511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20192261" y3="4.16031673" z3="-2.72370872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94688035" y3="5.49340253" z3="-2.94035704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03211734" y3="3.87050318" z3="-2.07764198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58178099" y3="6.24849498" z3="-2.46832551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05060228" y3="4.94878917" z3="-4.3249584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86825039" y3="5.89751678" z3="-3.76237835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19768495" y3="5.24704588" z3="-4.94250548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68027721" y3="6.9611566" z3="-3.93370757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47440979" y3="-2.19862192" z3="-0.3040309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44366107" y3="-2.9906572" z3="-1.07115503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00475452" y3="-2.58067913" z3="0.58294624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08793268" y3="-1.37835004" z3="-0.72275208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16942727" y3="-1.42772057" z3="-1.14989157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30349234" y3="-0.38669103" z3="-1.49895609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09397365" y3="-1.55362954" z3="-0.94078673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40724155" y3="-2.08242687" z3="-2.00105873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3444,.0427,-.1956;7.3917,.1591,.4099;6.6508,.4347,-.3468;4.7281,1.2329,-2.2609;4.3906,.4282,-1.1852;2.7277,.843,-3.6599;3.6313,1.7456,-3.1306;1.376,2.5885,-4.6063;1.5588,1.247,-4.3706;.4958,2.9242,-5.1636;2.9261,-.4875,-3.4424;3.1011,.0371,-1.0015;2.4024,-1.1035,-2.0032;.9312,-.9719,-1.8285;3.1034,-2.429,-1.8523;-.1424,-3.6183,.6736;-.019,-5.2577,-4.7432;-.2467,-5.0004,-3.7051;-.8427,-4.3112,-1.0846;.7781,-4.5903,-2.8546;-1.562,-5.0925,-3.2451;-1.8608,-4.7427,-1.9306;.4924,-4.2608,-1.528;1.8109,-4.5091,-3.2028;-2.3597,-5.4095,-3.9191;-2.896,-4.7851,-1.5856;-1.0311,-3.8624,.2362;-2.1711,-3.647,.8808;-3.0591,-4.1101,.4484;-2.1656,-3.5074,2.3473;-2.2228,-3.3125,5.1445;-3.3614,-3.7098,3.0517;-.9982,-3.2134,3.0676;-1.024,-3.1169,4.456;-3.3892,-3.6145,4.4402;-4.2767,-3.9514,2.5044;-.0391,-3.0809,2.5623;-.0942,-2.9092,4.9937;-4.3273,-3.783,4.9763;-2.2426,-3.2447,6.2358;1.4139,-3.8954,-.6253;2.1732,-3.394,-1.0795;.5207,.2406,-4.7111;-3.0768,-1.7219,.0177;-2.9033,-.969,1.1783;-1.8413,-.3194,1.5128;-.3685,.5588,1.2188;-.4444,1.4552,-.4095;.9876,-.6923,1.4035;-.3647,1.754,2.6614;-3.8803,-.9565,2.074;-3.655,-.3381,3.3309;-.2037,.763,-1.2353;.3267,2.2472,-.4052;-1.4252,1.9367,-.5727;1.0156,-1.0547,2.4447;1.9598,-.2275,1.1659;.8662,-1.5362,.705;-.4237,1.2162,3.6244;.5698,2.3441,2.6625;-1.2086,2.4646,2.6068;-2.7945,-.7927,3.8474;-4.5716,-.5095,3.911;-3.4836,.7437,3.207;4.8462,-.7152,.987;4.4136,-2.0399,.8467;3.76,-2.6847,1.8894;3.556,-1.9921,3.0789;4.0425,-.7031,3.2764;4.6956,-.0716,2.2227;4.5153,-2.5369,-.119;3.3593,-3.6913,1.7653;2.6944,-2.5894,4.1042;3.8661,-.1943,4.2252;5.0451,.9581,2.3402;-.797,.4588,-4.2878;-1.7751,-.51,-4.4669;-1.4255,-1.7009,-5.0914;-.1388,-1.9295,-5.5699;.8325,-.9573,-5.3675;-1.0434,1.3814,-3.7559;-2.7942,-.3659,-4.1067;-2.4359,-2.7518,-5.2343;.0933,-2.8691,-6.0717;1.8546,-1.1416,-5.7021;2.3696,-1.8951,5.0485;2.3148,-3.729,3.9364;-2.2108,-3.653,-6.0137;-3.4383,-2.6674,-4.5535;7.0728,1.1596,-1.4945;6.1103,1.5511,-2.4702;8.4411,1.4899,-1.6939;8.8487,2.1588,-2.8219;9.169,1.1901,-.9337;9.905,2.4025,-2.9672;6.568,2.225,-3.6367;7.8992,2.5198,-3.8077;5.8453,2.4993,-4.4086;8.2287,3.032,-4.7163;3.3968,3.1497,-3.322;2.2799,3.5623,-4.1067;4.2019,4.1603,-2.7237;3.9469,5.4934,-2.9404;5.0321,3.8705,-2.0776;4.5818,6.2485,-2.4683;2.0506,4.9488,-4.325;2.8683,5.8975,-3.7624;1.1977,5.247,-4.9425;2.6803,6.9612,-3.9337;-4.4744,-2.1986,-.304;-4.4437,-2.9907,-1.0712;-5.0048,-2.5807,.5829;-5.0879,-1.3784,-.7228;-2.1694,-1.4277,-1.1499;-2.3035,-.3867,-1.499;-1.094,-1.5536,-.9408;-2.4072,-2.0824,-2.0011;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417161669</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002655452248 0.000323250574 0.017404964745 0.005346152926</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030520432 -0.000900824 -0.000284521 0.000141977 0.000246354 0.000386813 0.000394236 0.000494924 0.000609795 0.000788979 0.000915871 0.001094673 0.001258127 0.001280441 0.001365143 0.001385623 0.001686201 0.001765987 0.001812566 0.001955418 0.002141131 0.002491901 0.002556640 0.002712722 0.002817865 0.003131188 0.003234896 0.003437541 0.003838964 0.003956569 0.004337804 0.004709795 0.004819600 0.005067339 0.005844623 0.006063922 0.006252801 0.006570523 0.006785696 0.007514734 0.008002900 0.008104136 0.009144914 0.009489354 0.009906298 0.010692541 0.011024273 0.011552701 0.011689410 0.011973709 0.012857997 0.013166408 0.013964521 0.014374974 0.014919249 0.015317702 0.015573651 0.015927941 0.015991228 0.016834913 0.017286167 0.017681810 0.018854978 0.019395669 0.019738003 0.020583092 0.021160411 0.021342785 0.022359796 0.023088476 0.024979745 0.025907575 0.026622947 0.026831064 0.027383297 0.028978499 0.029347238 0.031402286 0.033172550 0.033291354 0.033672737 0.035784164 0.035883224 0.037319624 0.039289482 0.039774830 0.040545058 0.041768163 0.042691530 0.044370853 0.045204713 0.046650864 0.047429313 0.049143259 0.050264048 0.050724145 0.051019811 0.051214644 0.052471058 0.052501220 0.052844363 0.052940109 0.054463761 0.054655622 0.055448593 0.056166204 0.056471868 0.056498685 0.056986826 0.058358130 0.060255974 0.060578187 0.061429876 0.061937860 0.063036000 0.064298751 0.065018094 0.065739675 0.066284922 0.067667598 0.068862677 0.070118142 0.072555722 0.074283880 0.074414258 0.076093178 0.077746307 0.083368694 0.085071391 0.086821592 0.087085610 0.087755701 0.090315728 0.090744334 0.092947752 0.094576200 0.095189114 0.096293373 0.097246117 0.097734136 0.098725878 0.099584725 0.100183366 0.102288919 0.102704569 0.103101180 0.103361494 0.103910722 0.105087105 0.106716734 0.107310501 0.108744067 0.109100634 0.110216831 0.112117584 0.112318407 0.113326623 0.114822639 0.116136127 0.118836086 0.120573444 0.121330482 0.122264667 0.123953854 0.125228551 0.126215271 0.126868075 0.131658375 0.134862733 0.135571775 0.142466834 0.143502968 0.146824786 0.147152021 0.149599872 0.151987740 0.154457964 0.155751842 0.156592205 0.161178908 0.161704015 0.173247577 0.173765170 0.179204623 0.183910096 0.185033379 0.188919807 0.189971570 0.193851292 0.193924801 0.198267631 0.200023096 0.204939883 0.206780555 0.207105956 0.209744627 0.211333000 0.215472432 0.217359764 0.217651992 0.220422526 0.224899152 0.226203223 0.231802384 0.234829643 0.235373301 0.235735992 0.244474164 0.255705084 0.257054404 0.262791345 0.269607055 0.279978210 0.282863180 0.286147991 0.291397027 0.296019275 0.304179775 0.305578726 0.307153993 0.313345644 0.316430921 0.317044743 0.321898070 0.329278576 0.332401191 0.350411189 0.351831328 0.354703752 0.355428163 0.359829580 0.362699697 0.363205806 0.384018681 0.385860338 0.391557063 0.410418132 0.425240775 0.429827235 0.458022622 0.468536675 0.475163055 0.481716192 0.482833189 0.486962685 0.490336908 0.508649049 0.514833102 0.534978190 0.566017847 0.572702660 0.591778787 0.593432425 0.606249988 0.607622868 0.644410902 0.646371425 0.648659367 0.674197249 0.677339444 0.684913749 0.691430191 0.693082955 0.699347133 0.704154555 0.716856508 0.741176117 0.751164646 0.758329711 0.767358860 0.772382280 0.778746423 0.810456472 0.812610273 0.816770090 0.821573603 0.822360209 0.829872960 0.831333664 0.835547502 0.836714544 0.845143982 0.846026988 0.848161819 0.858267116 0.864533499 0.865393560 0.873163058 0.881084260 0.884281938 0.889285019 0.891813983 0.900571910 0.903823134 0.920418625 0.923318789 0.933039345 0.935040745 0.964906775 0.975643933 0.985623859 1.000912724 1.017466860 1.027325648 1.041259945 1.050201869 1.057261980 1.067964125 1.086511988 1.088452847 1.103474153 1.106155660 1.112205375 1.119527861 1.123566722 1.135459003 1.142913438 1.173924900 1.175498856 1.180820157 1.186231458 1.189719521 1.195786940 1.223817241 1.227670514 1.274185101 1.300933746 1.318938388 1.327990049 1.332615008 1.334489594 1.335674988 1.340860289 1.342796229 1.344880168 1.358709093 1.377114004 1.382866496 1.383945441 1.413039553 1.419553881 1.434971542 1.551434527 1.670650495 1.774852381</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">176</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34803386" y3="0.04029358" z3="-0.19735359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39597016" y3="0.15844112" z3="0.40530966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65367041" y3="0.43369778" z3="-0.35020793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72759362" y3="1.23229054" z3="-2.26059797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39253651" y3="0.42561688" z3="-1.18543474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72610884" y3="0.84249709" z3="-3.65792175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62894773" y3="1.7453981" z3="-3.12781109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3702579" y3="2.58803003" z3="-4.59848026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55601445" y3="1.24581831" z3="-4.36714221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48917311" y3="2.92321216" z3="-5.15448513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92631083" y3="-0.48813501" z3="-3.44230581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10370657" y3="0.03300173" z3="-1.0005378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40317294" y3="-1.10547126" z3="-2.00347725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93221204" y3="-0.97148345" z3="-1.8278152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10188163" y3="-2.43240798" z3="-1.85456765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14474917" y3="-3.62063509" z3="0.67494468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02334979" y3="-5.25891161" z3="-4.74183396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24987264" y3="-5.00405662" z3="-3.70309153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8439926" y3="-4.31706506" z3="-1.08191232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77557775" y3="-4.5932297" z3="-2.85306196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56425191" y3="-5.09910231" z3="-3.24215418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86212381" y3="-4.75049824" z3="-1.92705574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49042645" y3="-4.26439404" z3="-1.52625114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8064462" y3="-4.5069266" z3="-3.20216289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36523801" y3="-5.41316215" z3="-3.91645581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89861476" y3="-4.79133143" z3="-1.58107534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03321223" y3="-3.86563907" z3="0.23802349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17344418" y3="-3.64486461" z3="0.88127143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06267042" y3="-4.1067824" z3="0.44982078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16822321" y3="-3.50265758" z3="2.34776447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22665525" y3="-3.29998705" z3="5.14441816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36531602" y3="-3.69956429" z3="3.05186264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00014668" y3="-3.21080512" z3="3.06818069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02672819" y3="-3.11009731" z3="4.45612057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39352453" y3="-3.6006155" z3="4.44014843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2809896" y3="-3.93991941" z3="2.50470858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03953737" y3="-3.08373005" z3="2.56338563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0970547" y3="-2.90319856" z3="4.99361934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33213865" y3="-3.76559917" z3="4.97593111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24703015" y3="-3.22902956" z3="6.23550886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41059612" y3="-3.89555939" z3="-0.6245661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17047588" y3="-3.39603984" z3="-1.07997799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52000836" y3="0.2379363" z3="-4.710887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07177419" y3="-1.72041919" z3="0.01499547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90103389" y3="-0.96615306" z3="1.17518443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83858977" y3="-0.3198394" z3="1.51356194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36440453" y3="0.55698466" z3="1.22245179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43953191" y3="1.45569847" z3="-0.40457732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99074918" y3="-0.69535693" z3="1.40575761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36024035" y3="1.74922014" z3="2.66746334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88184363" y3="-0.94943797" z3="2.06638948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66090298" y3="-0.32840312" z3="3.32271131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19412714" y3="0.76600751" z3="-1.22958947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33294641" y3="2.24885611" z3="-0.3981088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42071905" y3="1.93415806" z3="-0.5698591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01970506" y3="-1.05707227" z3="2.44691883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9629954" y3="-0.23154725" z3="1.16662318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86834282" y3="-1.53988285" z3="0.70823951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42117693" y3="1.2095536" z3="3.62913059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57578415" y3="2.33721887" z3="2.67079209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20250235" y3="2.46186929" z3="2.61343409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80349318" y3="-0.78336994" z3="3.84407405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58030711" y3="-0.49690443" z3="3.89883568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48718964" y3="0.75290607" z3="3.19698647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85228084" y3="-0.71832782" z3="0.98590974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41647798" y3="-2.04192275" z3="0.84477165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76349549" y3="-2.68654091" z3="1.88803622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56438072" y3="-1.99520244" z3="3.07984726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05337417" y3="-0.70756852" z3="3.27719276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70560085" y3="-0.07620286" z3="2.22271461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51205544" y3="-2.53716977" z3="-0.12393481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35750345" y3="-3.69143502" z3="1.7612693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69876381" y3="-2.59052104" z3="4.10288336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87708334" y3="-0.1988581" z3="4.22469997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05518976" y3="0.95283022" z3="2.3394752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79864067" y3="0.45200392" z3="-4.28705069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77499341" y3="-0.51839918" z3="-4.47114924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4216317" y3="-1.70686572" z3="-5.10035941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13331729" y3="-1.93122035" z3="-5.57573524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83543793" y3="-0.9576769" z3="-5.37255069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04740779" y3="1.3722984" z3="-3.75207221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79465677" y3="-0.37726354" z3="-4.1122155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42944553" y3="-2.7593467" z3="-5.24316407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10095944" y3="-2.86906817" z3="-6.07922443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85844356" y3="-1.13855" z3="-5.70671572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37831234" y3="-1.89715273" z3="5.04756475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3078959" y3="-3.72713266" z3="3.92903883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19954409" y3="-3.66120674" z3="-6.0200028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4353071" y3="-2.6771805" z3="-4.56586377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07330312" y3="1.16016572" z3="-1.49783183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10901591" y3="1.55218891" z3="-2.47154609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4409756" y3="1.49211276" z3="-1.69903728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84627962" y3="2.16328027" z3="-2.82674634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17023903" y3="1.19162648" z3="-0.94039241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90190566" y3="2.40722711" z3="-2.97364113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56424796" y3="2.22816456" z3="-3.63788597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89496585" y3="2.52494805" z3="-3.81058457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84005992" y3="2.50324762" z3="-4.40817826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22261207" y3="3.03793866" z3="-4.7191244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3922855" y3="3.14921868" z3="-3.31615279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2729817" y3="3.56209984" z3="-4.09755054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19729977" y3="4.15923468" z3="-2.71796186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93862593" y3="5.49286055" z3="-2.93010439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02904457" y3="3.86957656" z3="-2.07381903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57270369" y3="6.24824607" z3="-2.45703335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04048049" y3="4.94872244" z3="-4.31183681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85760555" y3="5.89718313" z3="-3.74892642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18604888" y3="5.24672757" z3="-4.92739749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66729898" y3="6.96082454" z3="-3.91733532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47020889" y3="-2.19326416" z3="-0.31125954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43942457" y3="-2.9873073" z3="-1.07699739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00589362" y3="-2.57198405" z3="0.57424388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07891062" y3="-1.37142483" z3="-0.73382404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16117916" y3="-1.42891782" z3="-1.15139085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29721753" y3="-0.3907103" z3="-1.50409748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08579792" y3="-1.55248919" z3="-0.9406214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.39793871" y3="-2.08657076" z3="-2.00218054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.348,.0403,-.1974;7.396,.1584,.4053;6.6537,.4337,-.3502;4.7276,1.2323,-2.2606;4.3925,.4256,-1.1854;2.7261,.8425,-3.6579;3.6289,1.7454,-3.1278;1.3703,2.588,-4.5985;1.556,1.2458,-4.3671;.4892,2.9232,-5.1545;2.9263,-.4881,-3.4423;3.1037,.033,-1.0005;2.4032,-1.1055,-2.0035;.9322,-.9715,-1.8278;3.1019,-2.4324,-1.8546;-.1447,-3.6206,.6749;-.0233,-5.2589,-4.7418;-.2499,-5.0041,-3.7031;-.844,-4.3171,-1.0819;.7756,-4.5932,-2.8531;-1.5643,-5.0991,-3.2422;-1.8621,-4.7505,-1.9271;.4904,-4.2644,-1.5263;1.8064,-4.5069,-3.2022;-2.3652,-5.4132,-3.9165;-2.8986,-4.7913,-1.5811;-1.0332,-3.8656,.238;-2.1734,-3.6449,.8813;-3.0627,-4.1068,.4498;-2.1682,-3.5027,2.3478;-2.2267,-3.3,5.1444;-3.3653,-3.6996,3.0519;-1.0001,-3.2108,3.0682;-1.0267,-3.1101,4.4561;-3.3935,-3.6006,4.4401;-4.281,-3.9399,2.5047;-.0395,-3.0837,2.5634;-.0971,-2.9032,4.9936;-4.3321,-3.7656,4.9759;-2.247,-3.229,6.2355;1.4106,-3.8956,-.6246;2.1705,-3.396,-1.08;.52,.2379,-4.7109;-3.0718,-1.7204,.015;-2.901,-.9662,1.1752;-1.8386,-.3198,1.5136;-.3644,.557,1.2225;-.4395,1.4557,-.4046;.9907,-.6954,1.4058;-.3602,1.7492,2.6675;-3.8818,-.9494,2.0664;-3.6609,-.3284,3.3227;-.1941,.766,-1.2296;.3329,2.2489,-.3981;-1.4207,1.9342,-.5699;1.0197,-1.0571,2.4469;1.963,-.2315,1.1666;.8683,-1.5399,.7082;-.4212,1.2096,3.6291;.5758,2.3372,2.6708;-1.2025,2.4619,2.6134;-2.8035,-.7834,3.8441;-4.5803,-.4969,3.8988;-3.4872,.7529,3.197;4.8523,-.7183,.9859;4.4165,-2.0419,.8448;3.7635,-2.6865,1.888;3.5644,-1.9952,3.0798;4.0534,-.7076,3.2772;4.7056,-.0762,2.2227;4.5121,-2.5372,-.1239;3.3575,-3.6914,1.7613;2.6988,-2.5905,4.1029;3.8771,-.1989,4.2247;5.0552,.9528,2.3395;-.7986,.452,-4.2871;-1.775,-.5184,-4.4711;-1.4216,-1.7069,-5.1004;-.1333,-1.9312,-5.5757;.8354,-.9577,-5.3726;-1.0474,1.3723,-3.7521;-2.7947,-.3773,-4.1122;-2.4294,-2.7593,-5.2432;.101,-2.8691,-6.0792;1.8584,-1.1385,-5.7067;2.3783,-1.8972,5.0476;2.3079,-3.7271,3.929;-2.1995,-3.6612,-6.02;-3.4353,-2.6772,-4.5659;7.0733,1.1602,-1.4978;6.109,1.5522,-2.4715;8.441,1.4921,-1.699;8.8463,2.1633,-2.8267;9.1702,1.1916,-.9404;9.9019,2.4072,-2.9736;6.5642,2.2282,-3.6379;7.895,2.5249,-3.8106;5.8401,2.5032,-4.4082;8.2226,3.0379,-4.7191;3.3923,3.1492,-3.3162;2.273,3.5621,-4.0976;4.1973,4.1592,-2.718;3.9386,5.4929,-2.9301;5.029,3.8696,-2.0738;4.5727,6.2482,-2.457;2.0405,4.9487,-4.3118;2.8576,5.8972,-3.7489;1.186,5.2467,-4.9274;2.6673,6.9608,-3.9173;-4.4702,-2.1933,-.3113;-4.4394,-2.9873,-1.077;-5.0059,-2.572,.5742;-5.0789,-1.3714,-.7338;-2.1612,-1.4289,-1.1514;-2.2972,-.3907,-1.5041;-1.0858,-1.5525,-.9406;-2.3979,-2.0866,-2.0022;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650403787798</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003934404692 0.000416599444 0.019342914987 0.005339831466</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030525124 -0.000634577 -0.000281007 0.000185403 0.000246210 0.000387456 0.000394770 0.000492832 0.000609748 0.000789127 0.000916502 0.001094772 0.001262074 0.001281290 0.001365696 0.001385846 0.001688332 0.001768389 0.001812633 0.001955520 0.002142228 0.002498175 0.002557729 0.002712933 0.002818479 0.003131356 0.003236020 0.003444888 0.003838659 0.003956258 0.004337839 0.004710615 0.004820790 0.005069661 0.005848100 0.006067127 0.006253161 0.006571749 0.006786393 0.007534578 0.008004295 0.008104148 0.009145018 0.009489822 0.009907397 0.010693442 0.011028496 0.011561269 0.011691250 0.011974676 0.012858212 0.013169207 0.013965531 0.014375367 0.014918791 0.015321590 0.015574507 0.015928473 0.015998053 0.016835269 0.017295783 0.017682252 0.018866299 0.019400272 0.019763272 0.020611743 0.021163643 0.021345978 0.022366461 0.023090091 0.024985004 0.025908530 0.026635594 0.026830987 0.027385352 0.029004700 0.029347320 0.031405227 0.033214611 0.033326829 0.033687139 0.035784609 0.036071277 0.037327336 0.039290654 0.039785296 0.040557722 0.041771036 0.042691444 0.044371281 0.045205081 0.046656174 0.047453703 0.049145249 0.050268291 0.050728951 0.051021311 0.051214899 0.052471106 0.052501433 0.052844435 0.052941051 0.054464024 0.054656062 0.055448528 0.056166202 0.056472426 0.056499058 0.056987171 0.058371796 0.060258540 0.060583522 0.061429863 0.061949650 0.063041691 0.064323501 0.065027308 0.065747947 0.066285230 0.067690386 0.068868638 0.070125851 0.072565768 0.074284462 0.074425840 0.076096491 0.077748113 0.083371085 0.085073679 0.086822129 0.087099009 0.087781648 0.090317725 0.090751772 0.092948320 0.094576345 0.095189356 0.096293403 0.097246605 0.097734195 0.098726500 0.099584908 0.100183615 0.102290738 0.102705624 0.103105041 0.103365003 0.103913345 0.105102591 0.106716709 0.107310580 0.108754153 0.109153484 0.110229614 0.112183342 0.112318445 0.113378645 0.114827045 0.116156353 0.118836294 0.120574821 0.121356779 0.122279148 0.123977702 0.125235036 0.126214915 0.126869264 0.131659312 0.134862876 0.135574923 0.142472459 0.143504742 0.146824967 0.147152932 0.149599837 0.151988434 0.154458340 0.155779753 0.156602436 0.161203875 0.161704938 0.173250865 0.173765908 0.179237966 0.183912103 0.185034930 0.188922896 0.189971474 0.193854763 0.193924745 0.198273498 0.200023518 0.204939843 0.206795113 0.207112718 0.209745411 0.211367791 0.215489356 0.217368358 0.217656401 0.220429467 0.224901363 0.226203325 0.231816108 0.234829724 0.235374641 0.235736422 0.244482160 0.255707004 0.257054636 0.262795923 0.269607058 0.280037517 0.282864581 0.286150915 0.291400191 0.296090404 0.304181044 0.305585234 0.307155025 0.313346426 0.316431582 0.317100257 0.321898370 0.329296123 0.332404539 0.350530327 0.351831795 0.354720901 0.355444963 0.359829785 0.362699768 0.363240705 0.384055441 0.385860492 0.391557008 0.410418303 0.425243692 0.429845712 0.458026429 0.468537217 0.475593507 0.481733210 0.482892110 0.486971191 0.490338970 0.508720912 0.514871785 0.534986222 0.566018776 0.572703002 0.591781563 0.593444248 0.606250180 0.607626230 0.644434198 0.646375928 0.648681410 0.674199127 0.677340135 0.684913957 0.691434515 0.693083155 0.699356039 0.704167298 0.716856718 0.741176341 0.751167440 0.758334547 0.767375240 0.772382326 0.778747111 0.810462314 0.812623595 0.816834114 0.821575362 0.822387827 0.830115483 0.831346059 0.835548065 0.836729065 0.845148806 0.846072159 0.848163765 0.858290134 0.864573505 0.865424317 0.873163541 0.881086552 0.884282378 0.889285316 0.891832098 0.900576514 0.903825229 0.920478108 0.923320212 0.933046069 0.935043567 0.964911376 0.975645375 0.985625839 1.000912763 1.017481255 1.027326852 1.041263368 1.050202288 1.057262000 1.068036235 1.086512227 1.088454971 1.103475506 1.106156251 1.112205391 1.119553157 1.123579711 1.135463144 1.142984027 1.173925689 1.175510854 1.180820243 1.186242977 1.189769025 1.195809777 1.223834965 1.227760346 1.274187645 1.300934325 1.318940380 1.328015022 1.332615102 1.334491631 1.335684670 1.340865318 1.342797083 1.344881260 1.358759517 1.377226052 1.382872897 1.383996358 1.413307944 1.419554925 1.435007552 1.551435400 1.671517602 1.774869218</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">177</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34963021" y3="0.03748616" z3="-0.19897536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39755908" y3="0.15924552" z3="0.40336552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65449625" y3="0.43417555" z3="-0.35149099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72610054" y3="1.23092703" z3="-2.26036327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39301712" y3="0.42251787" z3="-1.18615677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72478958" y3="0.8395397" z3="-3.65740639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62609214" y3="1.74322895" z3="-3.12628343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36481859" y3="2.58382278" z3="-4.59390623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55352342" y3="1.24189356" z3="-4.36519114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48246745" y3="2.91876208" z3="-5.14804935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92749346" y3="-0.49091121" z3="-3.44306632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10491582" y3="0.02813828" z3="-1.00097334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40414952" y3="-1.10921647" z3="-2.00480443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93324038" y3="-0.9747342" z3="-1.8292794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10226216" y3="-2.43636917" z3="-1.85634359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14652411" y3="-3.62245416" z3="0.67656223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02798128" y3="-5.25968785" z3="-4.74091859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2546826" y3="-5.00364928" z3="-3.7024567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84760513" y3="-4.31643782" z3="-1.0810991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77092486" y3="-4.59290331" z3="-2.8529975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56923767" y3="-5.0978893" z3="-3.24102203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86628222" y3="-4.74986585" z3="-1.9257464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48660041" y3="-4.26402902" z3="-1.52611558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.803552" y3="-4.5107221" z3="-3.20259553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36758268" y3="-5.41505163" z3="-3.91448763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90078983" y3="-4.79452455" z3="-1.57904197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03553162" y3="-3.86570179" z3="0.23917705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17540659" y3="-3.64169349" z3="0.88150146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06555219" y3="-4.10175764" z3="0.44997367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17055567" y3="-3.49729471" z3="2.34768214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22985324" y3="-3.28965938" z3="5.14395004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36877632" y3="-3.68843758" z3="3.05141843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00201406" y3="-3.20854563" z3="3.06823509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02883247" y3="-3.10555945" z3="4.4560422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39754766" y3="-3.58684264" z3="4.4394771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28520548" y3="-3.92560302" z3="2.50398542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04131881" y3="-3.08499273" z3="2.563892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09823744" y3="-2.90182812" z3="4.99376428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33768128" y3="-3.74625626" z3="4.97504374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25071119" y3="-3.21666111" z3="6.23489139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40858605" y3="-3.89667932" z3="-0.62472147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16898948" y3="-3.3987169" z3="-1.08065045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51977508" y3="0.23275103" z3="-4.71080883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06899374" y3="-1.71593345" z3="0.01169419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89774333" y3="-0.96071813" z3="1.17127414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83412173" y3="-0.31713741" z3="1.51097333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35667688" y3="0.55568318" z3="1.22218246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42872311" y3="1.45566516" z3="-0.40403123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99515716" y3="-0.69985227" z3="1.4057275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35057457" y3="1.74566059" z3="2.66893175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88016587" y3="-0.94011901" z3="2.06075222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65987943" y3="-0.31703181" z3="3.31623214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18815757" y3="0.76477874" z3="-1.23101313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34189403" y3="2.24738714" z3="-0.39716953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40923743" y3="1.93807112" z3="-0.56702806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02172206" y3="-1.0627853" z3="2.44674755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96851501" y3="-0.2374556" z3="1.16859226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87194591" y3="-1.54331448" z3="0.7070978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41363711" y3="1.20436878" z3="3.62959658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58658988" y3="2.33135009" z3="2.67436885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19100862" y3="2.46035725" z3="2.61553142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80444605" y3="-0.77272929" z3="3.84003451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58077412" y3="-0.48201263" z3="3.89133325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48339914" y3="0.76352265" z3="3.18850676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85457626" y3="-0.72272396" z3="0.98339121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41719156" y3="-2.04567863" z3="0.8410469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76328128" y3="-2.69053146" z3="1.88345116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56414093" y3="-2.00006229" z3="3.07481914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05725974" y3="-0.71379941" z3="3.27499821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71035774" y3="-0.08209868" z3="2.22136783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51511624" y3="-2.54100414" z3="-0.12562153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35834067" y3="-3.69500319" z3="1.75777139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70076052" y3="-2.59546657" z3="4.09982599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88608113" y3="-0.20697528" z3="4.22611207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06451401" y3="0.9460276" z3="2.34115967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79969518" y3="0.44394335" z3="-4.28909282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7737997" y3="-0.52803638" z3="-4.47430165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41814722" y3="-1.71521302" z3="-5.10321453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12946383" y3="-1.93684828" z3="-5.57962314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83753303" y3="-0.96111338" z3="-5.37160608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05090713" y3="1.36298736" z3="-3.75352599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79421709" y3="-0.38935444" z3="-4.11571288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42415077" y3="-2.76973806" z3="-5.24973589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10778167" y3="-2.87349693" z3="-6.08475117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86097571" y3="-1.13977303" z3="-5.70566879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38595299" y3="-1.90407727" z3="5.0498723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31044357" y3="-3.730424" z3="3.92663221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19064524" y3="-3.67184847" z3="-6.02554762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43182013" y3="-2.68726793" z3="-4.57623282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07230057" y3="1.16334521" z3="-1.4981249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10681207" y3="1.55428489" z3="-2.47111639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43910206" y3="1.49910072" z3="-1.69901217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84242174" y3="2.17299547" z3="-2.82564412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16937913" y3="1.19936412" z3="-0.94100537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89753609" y3="2.42087035" z3="-2.97198994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56006392" y3="2.23302365" z3="-3.63646098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88992929" y3="2.53350146" z3="-3.80879902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83482432" y3="2.50685035" z3="-4.40628803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2160767" y3="3.04950389" z3="-4.71639116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38592898" y3="3.14725916" z3="-3.31091247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26529868" y3="3.55913053" z3="-4.09081496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18858749" y3="4.15832545" z3="-2.7101068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9276651" y3="5.49127555" z3="-2.91982025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02207182" y3="3.86862857" z3="-2.06814744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56085663" y3="6.24669338" z3="-2.44604553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02935102" y3="4.94587956" z3="-4.30112531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84466634" y3="5.89516639" z3="-3.73627223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17327309" y3="5.24382555" z3="-4.91447129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65169024" y3="6.95890295" z3="-3.90169954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46764915" y3="-2.18627283" z3="-0.31592581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43658884" y3="-2.9794738" z3="-1.08171405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00441115" y3="-2.56444115" z3="0.56885767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07498453" y3="-1.36364727" z3="-0.73899304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15563944" y3="-1.42820671" z3="-1.15286567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28614886" y3="-0.38804215" z3="-1.50709352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08125355" y3="-1.55431785" z3="-0.93823477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.38931663" y3="-2.08685063" z3="-2.00198006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3496,.0375,-.199;7.3976,.1592,.4034;6.6545,.4342,-.3515;4.7261,1.2309,-2.2604;4.393,.4225,-1.1862;2.7248,.8395,-3.6574;3.6261,1.7432,-3.1263;1.3648,2.5838,-4.5939;1.5535,1.2419,-4.3652;.4825,2.9188,-5.148;2.9275,-.4909,-3.4431;3.1049,.0281,-1.001;2.4041,-1.1092,-2.0048;.9332,-.9747,-1.8293;3.1023,-2.4364,-1.8563;-.1465,-3.6225,.6766;-.028,-5.2597,-4.7409;-.2547,-5.0036,-3.7025;-.8476,-4.3164,-1.0811;.7709,-4.5929,-2.853;-1.5692,-5.0979,-3.241;-1.8663,-4.7499,-1.9257;.4866,-4.264,-1.5261;1.8036,-4.5107,-3.2026;-2.3676,-5.4151,-3.9145;-2.9008,-4.7945,-1.579;-1.0355,-3.8657,.2392;-2.1754,-3.6417,.8815;-3.0656,-4.1018,.45;-2.1706,-3.4973,2.3477;-2.2299,-3.2897,5.144;-3.3688,-3.6884,3.0514;-1.002,-3.2085,3.0682;-1.0288,-3.1056,4.456;-3.3975,-3.5868,4.4395;-4.2852,-3.9256,2.504;-.0413,-3.085,2.5639;-.0982,-2.9018,4.9938;-4.3377,-3.7463,4.975;-2.2507,-3.2167,6.2349;1.4086,-3.8967,-.6247;2.169,-3.3987,-1.0807;.5198,.2328,-4.7108;-3.069,-1.7159,.0117;-2.8977,-.9607,1.1713;-1.8341,-.3171,1.511;-.3567,.5557,1.2222;-.4287,1.4557,-.404;.9952,-.6999,1.4057;-.3506,1.7457,2.6689;-3.8802,-.9401,2.0608;-3.6599,-.317,3.3162;-.1882,.7648,-1.231;.3419,2.2474,-.3972;-1.4092,1.9381,-.567;1.0217,-1.0628,2.4467;1.9685,-.2375,1.1686;.8719,-1.5433,.7071;-.4136,1.2044,3.6296;.5866,2.3314,2.6744;-1.191,2.4604,2.6155;-2.8044,-.7727,3.84;-4.5808,-.482,3.8913;-3.4834,.7635,3.1885;4.8546,-.7227,.9834;4.4172,-2.0457,.841;3.7633,-2.6905,1.8835;3.5641,-2.0001,3.0748;4.0573,-.7138,3.275;4.7104,-.0821,2.2214;4.5151,-2.541,-.1256;3.3583,-3.695,1.7578;2.7008,-2.5955,4.0998;3.8861,-.207,4.2261;5.0645,.946,2.3412;-.7997,.4439,-4.2891;-1.7738,-.528,-4.4743;-1.4181,-1.7152,-5.1032;-.1295,-1.9368,-5.5796;.8375,-.9611,-5.3716;-1.0509,1.363,-3.7535;-2.7942,-.3894,-4.1157;-2.4242,-2.7697,-5.2497;.1078,-2.8735,-6.0848;1.861,-1.1398,-5.7057;2.386,-1.9041,5.0499;2.3104,-3.7304,3.9266;-2.1906,-3.6718,-6.0255;-3.4318,-2.6873,-4.5762;7.0723,1.1633,-1.4981;6.1068,1.5543,-2.4711;8.4391,1.4991,-1.699;8.8424,2.173,-2.8256;9.1694,1.1994,-.941;9.8975,2.4209,-2.972;6.5601,2.233,-3.6365;7.8899,2.5335,-3.8088;5.8348,2.5069,-4.4063;8.2161,3.0495,-4.7164;3.3859,3.1473,-3.3109;2.2653,3.5591,-4.0908;4.1886,4.1583,-2.7101;3.9277,5.4913,-2.9198;5.0221,3.8686,-2.0681;4.5609,6.2467,-2.446;2.0294,4.9459,-4.3011;2.8447,5.8952,-3.7363;1.1733,5.2438,-4.9145;2.6517,6.9589,-3.9017;-4.4676,-2.1863,-.3159;-4.4366,-2.9795,-1.0817;-5.0044,-2.5644,.5689;-5.075,-1.3636,-.739;-2.1556,-1.4282,-1.1529;-2.2861,-.388,-1.5071;-1.0813,-1.5543,-.9382;-2.3893,-2.0869,-2.002;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650396460433</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003860524429 0.000386428166 0.023650015856 0.005344228976</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030527487 -0.000905418 -0.000245995 0.000214277 0.000246039 0.000388650 0.000397242 0.000491255 0.000611811 0.000789919 0.000918245 0.001095392 0.001264335 0.001281151 0.001365203 0.001385539 0.001697128 0.001773013 0.001816590 0.001955133 0.002143416 0.002505348 0.002558291 0.002713002 0.002825168 0.003133831 0.003235703 0.003446511 0.003839548 0.003956609 0.004338473 0.004712476 0.004820801 0.005071210 0.005847745 0.006067680 0.006253276 0.006571913 0.006787960 0.007550712 0.008003973 0.008104808 0.009145109 0.009490246 0.009907758 0.010694372 0.011033386 0.011569276 0.011691439 0.011974941 0.012858063 0.013170086 0.013967828 0.014375344 0.014919576 0.015327483 0.015575944 0.015932794 0.016008045 0.016837366 0.017313413 0.017687715 0.018872897 0.019401136 0.019777727 0.020642432 0.021170464 0.021348618 0.022372285 0.023091749 0.024994377 0.025908534 0.026643999 0.026833192 0.027387045 0.029035574 0.029347307 0.031408552 0.033228402 0.033378234 0.033708092 0.035784662 0.036276831 0.037341696 0.039294924 0.039809917 0.040573157 0.041777789 0.042693426 0.044371928 0.045206400 0.046659328 0.047477796 0.049148237 0.050269171 0.050738028 0.051022034 0.051214816 0.052471200 0.052501422 0.052844400 0.052941283 0.054463939 0.054656879 0.055448478 0.056166581 0.056472421 0.056498754 0.056987110 0.058376009 0.060263342 0.060592927 0.061430205 0.061965564 0.063042794 0.064345915 0.065039037 0.065751710 0.066285332 0.067710700 0.068870298 0.070129245 0.072575332 0.074288380 0.074440294 0.076101906 0.077753893 0.083377510 0.085073798 0.086822029 0.087118952 0.087800772 0.090317903 0.090761498 0.092949292 0.094576611 0.095189325 0.096293420 0.097246634 0.097734351 0.098731289 0.099585026 0.100185067 0.102294421 0.102706573 0.103107979 0.103366681 0.103915712 0.105115062 0.106717015 0.107310563 0.108767825 0.109227975 0.110259481 0.112248914 0.112318432 0.113434517 0.114827919 0.116172448 0.118839777 0.120576455 0.121366984 0.122308553 0.124010191 0.125241940 0.126214635 0.126871004 0.131661034 0.134862224 0.135575512 0.142471728 0.143504790 0.146825436 0.147153696 0.149599514 0.151989755 0.154461989 0.155785619 0.156604000 0.161211694 0.161706224 0.173257414 0.173768343 0.179267258 0.183914189 0.185034613 0.188923586 0.189971358 0.193854374 0.193924722 0.198281716 0.200024349 0.204939529 0.206809149 0.207118223 0.209746047 0.211417256 0.215492138 0.217369799 0.217658712 0.220436763 0.224904034 0.226203327 0.231826678 0.234830188 0.235375333 0.235737599 0.244488227 0.255707255 0.257054990 0.262796060 0.269607179 0.280093025 0.282865935 0.286152980 0.291404158 0.296136423 0.304182901 0.305588634 0.307155730 0.313360078 0.316431852 0.317140608 0.321899098 0.329305505 0.332406269 0.350668932 0.351831897 0.354728354 0.355471290 0.359829867 0.362699809 0.363274727 0.384067076 0.385860584 0.391560337 0.410418656 0.425248990 0.429871732 0.458033818 0.468538572 0.475994324 0.481761695 0.482988240 0.486992155 0.490339768 0.508763850 0.514903702 0.534988740 0.566018964 0.572705379 0.591788166 0.593454576 0.606250203 0.607626778 0.644455295 0.646380433 0.648692333 0.674199679 0.677340154 0.684915040 0.691436870 0.693083402 0.699371606 0.704180682 0.716856969 0.741176634 0.751171444 0.758338404 0.767377544 0.772383204 0.778747242 0.810464685 0.812642069 0.816908730 0.821576993 0.822424770 0.830387751 0.831366048 0.835548157 0.836749532 0.845153392 0.846116713 0.848167354 0.858317408 0.864607130 0.865468048 0.873166516 0.881097697 0.884282379 0.889286667 0.891868322 0.900577102 0.903827336 0.920550392 0.923321760 0.933061972 0.935047936 0.964912207 0.975645863 0.985628722 1.000912859 1.017493288 1.027327015 1.041263915 1.050202302 1.057262072 1.068074478 1.086513042 1.088457700 1.103475705 1.106158991 1.112205447 1.119580275 1.123584457 1.135466198 1.143040874 1.173927820 1.175514120 1.180821745 1.186245558 1.189821555 1.195841133 1.223839257 1.227804534 1.274186896 1.300937073 1.318940402 1.328022416 1.332615080 1.334497448 1.335691706 1.340874592 1.342797272 1.344881028 1.358783256 1.377362565 1.382873433 1.384022555 1.413449184 1.419557989 1.435054474 1.551435784 1.672409331 1.774869981</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">178</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34947863" y3="0.03463736" z3="-0.1982536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39679135" y3="0.16074776" z3="0.40501211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65331711" y3="0.43468262" z3="-0.34984162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72374502" y3="1.23028624" z3="-2.25778823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39222123" y3="0.418697" z3="-1.18520869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72360728" y3="0.83645975" z3="-3.65599078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62254866" y3="1.74151486" z3="-3.12282611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35977885" y3="2.57955872" z3="-4.58944649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55155229" y3="1.23726284" z3="-4.36329995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47718914" y3="2.91270781" z3="-5.1443483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9295652" y3="-0.49418673" z3="-3.44433942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10490844" y3="0.0208063" z3="-1.00107824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40593486" y3="-1.11572275" z3="-2.00740384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93474215" y3="-0.98250985" z3="-1.83278498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10459113" y3="-2.4427637" z3="-1.86033179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14659519" y3="-3.61658985" z3="0.67489756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02976198" y3="-5.27026011" z3="-4.73816286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25560901" y3="-5.01150263" z3="-3.70017861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84773769" y3="-4.31508597" z3="-1.08071473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77057769" y3="-4.60035856" z3="-2.85177103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57017099" y3="-5.10172831" z3="-3.23842243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86717644" y3="-4.74803697" z3="-1.9244414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48681146" y3="-4.2675717" z3="-1.52570056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80164142" y3="-4.51751501" z3="-3.20139682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37095259" y3="-5.4171928" z3="-3.91118434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90349301" y3="-4.78549104" z3="-1.57811835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03552306" y3="-3.86050678" z3="0.23829159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17528773" y3="-3.63585395" z3="0.88069671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06531552" y3="-4.09598072" z3="0.44931891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17071539" y3="-3.4911316" z3="2.34690271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23013748" y3="-3.28309103" z3="5.14317081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36954976" y3="-3.67902429" z3="3.05042834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00144332" y3="-3.20595627" z3="3.0677908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02834347" y3="-3.10274306" z3="4.45552504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39835579" y3="-3.57711797" z3="4.43847247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28599182" y3="-3.91469865" z3="2.50309938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0394049" y3="-3.08697971" z3="2.56363572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09719292" y3="-2.90200456" z3="4.99329618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33845044" y3="-3.73475677" z3="4.97377985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25090566" y3="-3.21018801" z3="6.23412259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40927521" y3="-3.90001179" z3="-0.62528392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16983421" y3="-3.40396983" z3="-1.08214127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51922607" y3="0.22682324" z3="-4.71097699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06759196" y3="-1.71000285" z3="0.01030457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89446951" y3="-0.95412072" z3="1.16890662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82932687" y3="-0.31188854" z3="1.50639554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34989324" y3="0.55659836" z3="1.21822367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41685508" y3="1.45519839" z3="-0.40913287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99823988" y3="-0.70287621" z3="1.40422435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34118648" y3="1.74845182" z3="2.66359722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87572133" y3="-0.93091732" z3="2.05950686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65220062" y3="-0.3076042" z3="3.31437498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18005696" y3="0.76211637" z3="-1.23387121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36554405" y3="2.23901868" z3="-0.40439955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39247232" y3="1.94506714" z3="-0.57394948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0225715" y3="-1.06659962" z3="2.44489187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97308164" y3="-0.24271093" z3="1.16907896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87431572" y3="-1.5454876" z3="0.70458683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40681181" y3="1.20851928" z3="3.62488066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59813129" y3="2.33119977" z3="2.66881635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17941134" y3="2.46580128" z3="2.6086688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79688968" y3="-0.76508745" z3="3.83698639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57251009" y3="-0.47021025" z3="3.89099074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47338335" y3="0.77245379" z3="3.1857393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85659577" y3="-0.7278043" z3="0.98376585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41987392" y3="-2.05082227" z3="0.84005109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76709832" y3="-2.69721821" z3="1.88241675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56961449" y3="-2.00839558" z3="3.0761232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06039424" y3="-0.72196971" z3="3.27610137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71215144" y3="-0.08875413" z3="2.2224254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51383376" y3="-2.5439707" z3="-0.13009421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35947484" y3="-3.70125707" z3="1.75331838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70276869" y3="-2.60417563" z3="4.09792292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88518955" y3="-0.21527034" z3="4.22474772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06248121" y3="0.93967899" z3="2.34105918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.8007688" y3="0.43825355" z3="-4.29106224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77488935" y3="-0.53317488" z3="-4.47919863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41800931" y3="-1.72033752" z3="-5.1080253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12816869" y3="-1.94227617" z3="-5.5802016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83839876" y3="-0.96745737" z3="-5.37290923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05255994" y3="1.3572539" z3="-3.75546293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79577045" y3="-0.39419656" z3="-4.12286197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42423539" y3="-2.77386654" z3="-5.25662899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10900591" y3="-2.87918351" z3="-6.0842222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86246508" y3="-1.14634481" z3="-5.70422131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38470956" y3="-1.91258352" z3="5.04447586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30786555" y3="-3.73897972" z3="3.92070151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18966031" y3="-3.67655345" z3="-6.03118929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43358039" y3="-2.69107605" z3="-4.58500366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0696328" y3="1.16689105" z3="-1.49499583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10359933" y3="1.5574526" z3="-2.46757586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43557767" y3="1.50684584" z3="-1.69442228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8376024" y3="2.18457676" z3="-2.81929675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16622898" y3="1.20771508" z3="-0.93653732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89191975" y3="2.43532265" z3="-2.96458226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55561401" y3="2.24019376" z3="-3.63119762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88468427" y3="2.5447731" z3="-3.80214121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83025729" y3="2.51433488" z3="-4.40073154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20981865" y3="3.06342816" z3="-4.70840482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37946261" y3="3.14490764" z3="-3.30554323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2581402" y3="3.55562339" z3="-4.08510425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1799454" y3="4.15629826" z3="-2.70329918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91535867" y3="5.4896366" z3="-2.91024447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01292844" y3="3.8680422" z3="-2.06025354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54626168" y3="6.24612914" z3="-2.43442315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01950463" y3="4.94183136" z3="-4.2940833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83247851" y3="5.89195592" z3="-3.72749247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16348467" y3="5.23831823" z3="-4.90812644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63761284" y3="6.9553303" z3="-3.89184195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46728952" y3="-2.17851608" z3="-0.31574915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43907016" y3="-2.97285824" z3="-1.08127378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00367695" y3="-2.55538228" z3="0.56994935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07412133" y3="-1.35516134" z3="-0.73825806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.15514305" y3="-1.423917" z3="-1.15549599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28695392" y3="-0.38586944" z3="-1.510649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08070104" y3="-1.55060361" z3="-0.94326696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.39309872" y3="-2.08272355" z3="-2.00485189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3495,.0346,-.1983;7.3968,.1607,.405;6.6533,.4347,-.3498;4.7237,1.2303,-2.2578;4.3922,.4187,-1.1852;2.7236,.8365,-3.656;3.6225,1.7415,-3.1228;1.3598,2.5796,-4.5894;1.5516,1.2373,-4.3633;.4772,2.9127,-5.1443;2.9296,-.4942,-3.4443;3.1049,.0208,-1.0011;2.4059,-1.1157,-2.0074;.9347,-.9825,-1.8328;3.1046,-2.4428,-1.8603;-.1466,-3.6166,.6749;-.0298,-5.2703,-4.7382;-.2556,-5.0115,-3.7002;-.8477,-4.3151,-1.0807;.7706,-4.6004,-2.8518;-1.5702,-5.1017,-3.2384;-1.8672,-4.748,-1.9244;.4868,-4.2676,-1.5257;1.8016,-4.5175,-3.2014;-2.371,-5.4172,-3.9112;-2.9035,-4.7855,-1.5781;-1.0355,-3.8605,.2383;-2.1753,-3.6359,.8807;-3.0653,-4.096,.4493;-2.1707,-3.4911,2.3469;-2.2301,-3.2831,5.1432;-3.3695,-3.679,3.0504;-1.0014,-3.206,3.0678;-1.0283,-3.1027,4.4555;-3.3984,-3.5771,4.4385;-4.286,-3.9147,2.5031;-.0394,-3.087,2.5636;-.0972,-2.902,4.9933;-4.3385,-3.7348,4.9738;-2.2509,-3.2102,6.2341;1.4093,-3.9,-.6253;2.1698,-3.404,-1.0821;.5192,.2268,-4.711;-3.0676,-1.71,.0103;-2.8945,-.9541,1.1689;-1.8293,-.3119,1.5064;-.3499,.5566,1.2182;-.4169,1.4552,-.4091;.9982,-.7029,1.4042;-.3412,1.7485,2.6636;-3.8757,-.9309,2.0595;-3.6522,-.3076,3.3144;-.1801,.7621,-1.2339;.3655,2.239,-.4044;-1.3925,1.9451,-.5739;1.0226,-1.0666,2.4449;1.9731,-.2427,1.1691;.8743,-1.5455,.7046;-.4068,1.2085,3.6249;.5981,2.3312,2.6688;-1.1794,2.4658,2.6087;-2.7969,-.7651,3.837;-4.5725,-.4702,3.891;-3.4734,.7725,3.1857;4.8566,-.7278,.9838;4.4199,-2.0508,.8401;3.7671,-2.6972,1.8824;3.5696,-2.0084,3.0761;4.0604,-.722,3.2761;4.7122,-.0888,2.2224;4.5138,-2.544,-.1301;3.3595,-3.7013,1.7533;2.7028,-2.6042,4.0979;3.8852,-.2153,4.2247;5.0625,.9397,2.3411;-.8008,.4383,-4.2911;-1.7749,-.5332,-4.4792;-1.418,-1.7203,-5.108;-.1282,-1.9423,-5.5802;.8384,-.9675,-5.3729;-1.0526,1.3573,-3.7555;-2.7958,-.3942,-4.1229;-2.4242,-2.7739,-5.2566;.109,-2.8792,-6.0842;1.8625,-1.1463,-5.7042;2.3847,-1.9126,5.0445;2.3079,-3.739,3.9207;-2.1897,-3.6766,-6.0312;-3.4336,-2.6911,-4.585;7.0696,1.1669,-1.495;6.1036,1.5575,-2.4676;8.4356,1.5068,-1.6944;8.8376,2.1846,-2.8193;9.1662,1.2077,-.9365;9.8919,2.4353,-2.9646;6.5556,2.2402,-3.6312;7.8847,2.5448,-3.8021;5.8303,2.5143,-4.4007;8.2098,3.0634,-4.7084;3.3795,3.1449,-3.3055;2.2581,3.5556,-4.0851;4.1799,4.1563,-2.7033;3.9154,5.4896,-2.9102;5.0129,3.868,-2.0603;4.5463,6.2461,-2.4344;2.0195,4.9418,-4.2941;2.8325,5.892,-3.7275;1.1635,5.2383,-4.9081;2.6376,6.9553,-3.8918;-4.4673,-2.1785,-.3157;-4.4391,-2.9729,-1.0813;-5.0037,-2.5554,.5699;-5.0741,-1.3552,-.7383;-2.1551,-1.4239,-1.1555;-2.287,-.3859,-1.5106;-1.0807,-1.5506,-.9433;-2.3931,-2.0827,-2.0049;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650391821120</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004616912927 0.000415779733 0.016999559472 0.005336731698</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030529922 -0.000904491 -0.000217605 0.000189344 0.000248657 0.000386803 0.000395046 0.000491116 0.000611110 0.000789580 0.000917885 0.001097885 0.001264736 0.001281268 0.001366617 0.001385275 0.001694782 0.001773598 0.001828878 0.001955033 0.002143845 0.002507194 0.002557401 0.002713720 0.002832324 0.003134815 0.003235719 0.003446925 0.003841311 0.003957779 0.004338909 0.004715580 0.004821891 0.005071763 0.005849585 0.006067713 0.006261633 0.006573977 0.006787995 0.007557198 0.008004191 0.008107522 0.009145352 0.009495097 0.009907775 0.010695379 0.011035643 0.011577503 0.011691413 0.011984147 0.012858069 0.013170432 0.013973194 0.014375285 0.014919957 0.015332332 0.015577460 0.015941561 0.016017568 0.016846857 0.017326585 0.017708856 0.018876658 0.019401323 0.019787641 0.020668847 0.021178945 0.021350439 0.022376733 0.023093201 0.025007716 0.025909146 0.026646684 0.026837427 0.027387489 0.029064261 0.029347563 0.031414036 0.033232168 0.033416514 0.033734599 0.035784704 0.036447144 0.037358274 0.039304003 0.039846350 0.040598017 0.041789868 0.042710018 0.044371886 0.045214658 0.046661430 0.047508449 0.049152913 0.050269171 0.050747567 0.051021925 0.051214782 0.052471280 0.052501433 0.052844787 0.052941861 0.054463984 0.054656959 0.055448444 0.056167227 0.056472485 0.056498527 0.056987082 0.058377009 0.060266725 0.060606960 0.061431776 0.061989263 0.063042875 0.064354200 0.065050039 0.065751727 0.066286015 0.067730231 0.068869582 0.070129927 0.072588911 0.074293150 0.074452562 0.076104484 0.077760458 0.083389679 0.085074645 0.086822964 0.087146031 0.087819564 0.090317811 0.090769692 0.092949767 0.094576977 0.095189467 0.096293875 0.097247086 0.097734797 0.098737976 0.099585098 0.100187592 0.102298620 0.102707731 0.103110872 0.103367135 0.103920334 0.105125933 0.106717479 0.107310518 0.108788935 0.109314105 0.110307352 0.112299096 0.112318441 0.113493754 0.114827856 0.116185631 0.118847555 0.120577613 0.121367368 0.122337070 0.124042629 0.125251914 0.126214464 0.126872641 0.131663867 0.134861949 0.135575313 0.142479858 0.143505472 0.146826505 0.147153966 0.149599466 0.151991289 0.154471293 0.155785530 0.156607392 0.161213953 0.161706126 0.173268280 0.173768805 0.179301551 0.183914904 0.185035235 0.188923648 0.189971119 0.193855990 0.193924725 0.198290005 0.200025908 0.204941481 0.206820105 0.207120221 0.209746065 0.211464789 0.215492545 0.217369840 0.217659670 0.220446878 0.224906104 0.226203337 0.231837183 0.234831668 0.235375464 0.235737570 0.244492269 0.255707184 0.257056362 0.262798050 0.269608757 0.280150995 0.282867209 0.286153167 0.291407476 0.296161054 0.304183987 0.305589582 0.307160187 0.313396868 0.316432185 0.317179282 0.321901185 0.329313831 0.332407136 0.350847692 0.351832325 0.354732409 0.355503910 0.359829915 0.362700367 0.363294401 0.384068865 0.385860907 0.391566889 0.410418617 0.425255637 0.429900033 0.458064076 0.468542765 0.476324824 0.481825201 0.483134667 0.487026722 0.490342907 0.508796714 0.514934830 0.534990410 0.566018994 0.572706634 0.591809521 0.593462086 0.606250184 0.607626340 0.644458663 0.646385581 0.648695207 0.674200019 0.677341644 0.684915088 0.691440058 0.693084158 0.699377776 0.704199663 0.716857903 0.741176877 0.751175983 0.758338854 0.767377604 0.772385775 0.778747926 0.810467660 0.812662040 0.817017199 0.821579642 0.822455037 0.830650960 0.831390358 0.835549278 0.836781425 0.845155943 0.846164059 0.848170287 0.858343264 0.864621595 0.865534026 0.873170932 0.881109907 0.884284000 0.889288733 0.891904821 0.900577374 0.903830867 0.920616277 0.923324668 0.933086718 0.935058301 0.964913547 0.975646348 0.985631645 1.000913324 1.017500577 1.027329742 1.041264043 1.050205564 1.057262840 1.068090096 1.086515107 1.088460660 1.103475764 1.106161123 1.112205599 1.119602457 1.123586865 1.135467060 1.143074749 1.173931047 1.175517512 1.180826120 1.186248318 1.189857936 1.195883666 1.223842082 1.227816903 1.274186748 1.300938139 1.318941589 1.328022214 1.332616046 1.334521342 1.335694172 1.340879334 1.342797464 1.344881130 1.358788619 1.377542286 1.382878343 1.384046578 1.413542382 1.419568037 1.435075131 1.551435940 1.673612152 1.774879493</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">179</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34650079" y3="0.03226699" z3="-0.19638937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3927036" y3="0.16209835" z3="0.4100586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64977158" y3="0.43530974" z3="-0.34556526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72095855" y3="1.22834494" z3="-2.25564617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3897553" y3="0.4155693" z3="-1.18418819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72240423" y3="0.83309071" z3="-3.65594936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62001927" y3="1.73862655" z3="-3.12159669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35801295" y3="2.57498084" z3="-4.59021653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55044286" y3="1.2331686" z3="-4.3640099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47541224" y3="2.90830175" z3="-5.14482311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92944983" y3="-0.49709441" z3="-3.44483228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10300006" y3="0.01593667" z3="-1.00160791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40663714" y3="-1.12128299" z3="-2.00887729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93510231" y3="-0.99139148" z3="-1.83476816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10781011" y3="-2.44698427" z3="-1.86237058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14412631" y3="-3.61078397" z3="0.67134269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02929775" y3="-5.27861615" z3="-4.73723238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25552236" y3="-5.01547182" z3="-3.7004647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84670941" y3="-4.31090189" z3="-1.08332644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7720443" y3="-4.60755543" z3="-2.85170372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57115254" y3="-5.0982843" z3="-3.24026295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86725165" y3="-4.74121527" z3="-1.92726036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48828864" y3="-4.26975826" z3="-1.52694509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80580556" y3="-4.53451457" z3="-3.20036103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37180767" y3="-5.41259696" z3="-3.91302895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90259921" y3="-4.77624652" z3="-1.5819304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03363458" y3="-3.85418761" z3="0.23508688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17293565" y3="-3.63075486" z3="0.8786246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06342155" y3="-4.09048946" z3="0.44720679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16771377" y3="-3.48742521" z3="2.3449281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22667075" y3="-3.28391768" z3="5.14155776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36688787" y3="-3.67440012" z3="3.04820904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99782404" y3="-3.20565013" z3="3.06629249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02462178" y3="-3.10444882" z3="4.45420751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3954519" y3="-3.57481268" z3="4.43639531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28426819" y3="-3.90690533" z3="2.5003721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.036118" y3="-3.08706967" z3="2.56240626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09336759" y3="-2.90582083" z3="4.99253973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.336262" y3="-3.73112382" z3="4.97147269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24743534" y3="-3.21246923" z3="6.2325886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41208273" y3="-3.90471432" z3="-0.62647709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17339425" y3="-3.4099544" z3="-1.08364484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51811417" y3="0.22342814" z3="-4.71117765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06954549" y3="-1.70395353" z3="0.01026001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89093887" y3="-0.94752184" z3="1.16793522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82503512" y3="-0.3042437" z3="1.50034568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34273316" y3="0.55959139" z3="1.20994105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40463682" y3="1.45344073" z3="-0.41984887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00092971" y3="-0.70354679" z3="1.40121518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33302874" y3="1.75634912" z3="2.65118226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86837286" y3="-0.92416782" z3="2.06285827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63908462" y3="-0.30225891" z3="3.31724575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17860101" y3="0.75590408" z3="-1.24532375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38010721" y3="2.23064976" z3="-0.41791066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37663453" y3="1.9534278" z3="-0.58163639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02101184" y3="-1.06549575" z3="2.44254375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97765595" y3="-0.24673012" z3="1.167273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87571978" y3="-1.54669246" z3="0.70243319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39898782" y3="1.2201604" z3="3.61447099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60625518" y3="2.33862543" z3="2.65439569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17074024" y3="2.47389752" z3="2.59369216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78257176" y3="-0.76138517" z3="3.83625308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55732449" y3="-0.46415964" z3="3.89723951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4592985" y3="0.77762732" z3="3.18898334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85293531" y3="-0.73153917" z3="0.98416857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41787361" y3="-2.05500612" z3="0.83935454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7646569" y3="-2.70272415" z3="1.88047926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56345233" y3="-2.01437447" z3="3.07267097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05454858" y3="-0.72769532" z3="3.27539375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70727207" y3="-0.0932477" z3="2.22324357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51716665" y3="-2.54860896" z3="-0.12802255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36160947" y3="-3.70767508" z3="1.75310649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70036069" y3="-2.61248708" z3="4.09628876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88167414" y3="-0.2225937" z3="4.22720566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05950981" y3="0.93538826" z3="2.34494128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80290338" y3="0.43649147" z3="-4.29434924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77747449" y3="-0.53478046" z3="-4.48203482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42057689" y3="-1.72351428" z3="-5.10813278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13002369" y3="-1.94745376" z3="-5.57837763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83725207" y3="-0.97218534" z3="-5.36875897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05524511" y3="1.35675953" z3="-3.76116936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7989782" y3="-0.39408983" z3="-4.12776573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42705106" y3="-2.77687114" z3="-5.25513718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.1080435" y3="-2.88567744" z3="-6.08008834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86181686" y3="-1.15247543" z3="-5.69881416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38158917" y3="-1.9215986" z3="5.04569146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.314635" y3="-3.74879396" z3="3.92317486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.1919742" y3="-3.68011881" z3="-6.02907502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43683795" y3="-2.69329437" z3="-4.58445657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06611402" y3="1.16985246" z3="-1.48920386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10052877" y3="1.55903029" z3="-2.46281409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43151128" y3="1.51362925" z3="-1.68590616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83355555" y3="2.19443982" z3="-2.8088669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16166369" y3="1.21483235" z3="-0.92744028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88749712" y3="2.44856808" z3="-2.95190485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55265241" y3="2.2446025" z3="-3.62460092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88123028" y3="2.55362379" z3="-3.7926483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82763696" y3="2.51762676" z3="-4.39490619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20641976" y3="3.0753473" z3="-4.6972976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37505081" y3="3.14229284" z3="-3.30284553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25435819" y3="3.55222783" z3="-4.08360701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17290242" y3="4.15481766" z3="-2.69828517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90761301" y3="5.48731963" z3="-2.90558256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00612987" y3="3.86682742" z3="-2.05522826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53716691" y3="6.24394315" z3="-2.42882795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01364009" y3="4.93872479" z3="-4.29113726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82480304" y3="5.88942015" z3="-3.72318624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15767397" y3="5.23481386" z3="-4.90551937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62837431" y3="6.95288056" z3="-3.8867271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47066176" y3="-2.17297597" z3="-0.30923677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44481967" y3="-2.9698358" z3="-1.07187608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00490758" y3="-2.54630851" z3="0.57940672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07749557" y3="-1.3504884" z3="-0.73308262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16179688" y3="-1.41966108" z3="-1.15984786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2905879" y3="-0.37920291" z3="-1.51299502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08637753" y3="-1.54995279" z3="-0.95191448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40331963" y3="-2.07736063" z3="-2.00767551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3465,.0323,-.1964;7.3927,.1621,.4101;6.6498,.4353,-.3456;4.721,1.2283,-2.2556;4.3898,.4156,-1.1842;2.7224,.8331,-3.6559;3.62,1.7386,-3.1216;1.358,2.575,-4.5902;1.5504,1.2332,-4.364;.4754,2.9083,-5.1448;2.9294,-.4971,-3.4448;3.103,.0159,-1.0016;2.4066,-1.1213,-2.0089;.9351,-.9914,-1.8348;3.1078,-2.447,-1.8624;-.1441,-3.6108,.6713;-.0293,-5.2786,-4.7372;-.2555,-5.0155,-3.7005;-.8467,-4.3109,-1.0833;.772,-4.6076,-2.8517;-1.5712,-5.0983,-3.2403;-1.8673,-4.7412,-1.9273;.4883,-4.2698,-1.5269;1.8058,-4.5345,-3.2004;-2.3718,-5.4126,-3.913;-2.9026,-4.7762,-1.5819;-1.0336,-3.8542,.2351;-2.1729,-3.6308,.8786;-3.0634,-4.0905,.4472;-2.1677,-3.4874,2.3449;-2.2267,-3.2839,5.1416;-3.3669,-3.6744,3.0482;-.9978,-3.2057,3.0663;-1.0246,-3.1044,4.4542;-3.3955,-3.5748,4.4364;-4.2843,-3.9069,2.5004;-.0361,-3.0871,2.5624;-.0934,-2.9058,4.9925;-4.3363,-3.7311,4.9715;-2.2474,-3.2125,6.2326;1.4121,-3.9047,-.6265;2.1734,-3.41,-1.0836;.5181,.2234,-4.7112;-3.0695,-1.704,.0103;-2.8909,-.9475,1.1679;-1.825,-.3042,1.5003;-.3427,.5596,1.2099;-.4046,1.4534,-.4198;1.0009,-.7035,1.4012;-.333,1.7563,2.6512;-3.8684,-.9242,2.0629;-3.6391,-.3023,3.3172;-.1786,.7559,-1.2453;.3801,2.2306,-.4179;-1.3766,1.9534,-.5816;1.021,-1.0655,2.4425;1.9777,-.2467,1.1673;.8757,-1.5467,.7024;-.399,1.2202,3.6145;.6063,2.3386,2.6544;-1.1707,2.4739,2.5937;-2.7826,-.7614,3.8363;-4.5573,-.4642,3.8972;-3.4593,.7776,3.189;4.8529,-.7315,.9842;4.4179,-2.055,.8394;3.7647,-2.7027,1.8805;3.5635,-2.0144,3.0727;4.0545,-.7277,3.2754;4.7073,-.0932,2.2232;4.5172,-2.5486,-.128;3.3616,-3.7077,1.7531;2.7004,-2.6125,4.0963;3.8817,-.2226,4.2272;5.0595,.9354,2.3449;-.8029,.4365,-4.2943;-1.7775,-.5348,-4.482;-1.4206,-1.7235,-5.1081;-.13,-1.9475,-5.5784;.8373,-.9722,-5.3688;-1.0552,1.3568,-3.7612;-2.799,-.3941,-4.1278;-2.4271,-2.7769,-5.2551;.108,-2.8857,-6.0801;1.8618,-1.1525,-5.6988;2.3816,-1.9216,5.0457;2.3146,-3.7488,3.9232;-2.192,-3.6801,-6.0291;-3.4368,-2.6933,-4.5845;7.0661,1.1699,-1.4892;6.1005,1.559,-2.4628;8.4315,1.5136,-1.6859;8.8336,2.1944,-2.8089;9.1617,1.2148,-.9274;9.8875,2.4486,-2.9519;6.5527,2.2446,-3.6246;7.8812,2.5536,-3.7926;5.8276,2.5176,-4.3949;8.2064,3.0753,-4.6973;3.3751,3.1423,-3.3028;2.2544,3.5522,-4.0836;4.1729,4.1548,-2.6983;3.9076,5.4873,-2.9056;5.0061,3.8668,-2.0552;4.5372,6.2439,-2.4288;2.0136,4.9387,-4.2911;2.8248,5.8894,-3.7232;1.1577,5.2348,-4.9055;2.6284,6.9529,-3.8867;-4.4707,-2.173,-.3092;-4.4448,-2.9698,-1.0719;-5.0049,-2.5463,.5794;-5.0775,-1.3505,-.7331;-2.1618,-1.4197,-1.1598;-2.2906,-.3792,-1.513;-1.0864,-1.55,-.9519;-2.4033,-2.0774,-2.0077;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650393438063</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004587789659 0.000419822133 0.019372855840 0.005339579364</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030530892 -0.000858187 -0.000196579 0.000120669 0.000247210 0.000386483 0.000394476 0.000490416 0.000610188 0.000789755 0.000919302 0.001099002 0.001267568 0.001281760 0.001368781 0.001385175 0.001697766 0.001774622 0.001830992 0.001955574 0.002145633 0.002508405 0.002557553 0.002715290 0.002831925 0.003135536 0.003236052 0.003446873 0.003843897 0.003963410 0.004339110 0.004715287 0.004823700 0.005072679 0.005859731 0.006068676 0.006271856 0.006574759 0.006788259 0.007560387 0.008004736 0.008109065 0.009145297 0.009495887 0.009907650 0.010699318 0.011039624 0.011581341 0.011691375 0.012000789 0.012858101 0.013170250 0.013975970 0.014375210 0.014921244 0.015338734 0.015578880 0.015950817 0.016028718 0.016857091 0.017335480 0.017740559 0.018876939 0.019401374 0.019795646 0.020696473 0.021187073 0.021351466 0.022379661 0.023095696 0.025022662 0.025908995 0.026648513 0.026843779 0.027387587 0.029087092 0.029348728 0.031417041 0.033234428 0.033439691 0.033762090 0.035784503 0.036586097 0.037373432 0.039316455 0.039877333 0.040637445 0.041811696 0.042728087 0.044371914 0.045237828 0.046661214 0.047538319 0.049158378 0.050269199 0.050757261 0.051021939 0.051214849 0.052471249 0.052502081 0.052845176 0.052941833 0.054463833 0.054656700 0.055448358 0.056167207 0.056473786 0.056498400 0.056987114 0.058377178 0.060270167 0.060621444 0.061434525 0.062014766 0.063044265 0.064358768 0.065058288 0.065752305 0.066286425 0.067744969 0.068869982 0.070129969 0.072600184 0.074300849 0.074461473 0.076109499 0.077761950 0.083411107 0.085077560 0.086824316 0.087167933 0.087841997 0.090318163 0.090773399 0.092950376 0.094577609 0.095190113 0.096296160 0.097247092 0.097736767 0.098746151 0.099585213 0.100190611 0.102307393 0.102710140 0.103116236 0.103367667 0.103925195 0.105148603 0.106717502 0.107310457 0.108819377 0.109423764 0.110361929 0.112318166 0.112361835 0.113554730 0.114828452 0.116195659 0.118860707 0.120578981 0.121367801 0.122370475 0.124083363 0.125266027 0.126214932 0.126875528 0.131668491 0.134861596 0.135575452 0.142501633 0.143506830 0.146829758 0.147153887 0.149600149 0.151995005 0.154492211 0.155792498 0.156606942 0.161214894 0.161707225 0.173277899 0.173768880 0.179324590 0.183915387 0.185039468 0.188923699 0.189970949 0.193863127 0.193924801 0.198296566 0.200027324 0.204948116 0.206829395 0.207120553 0.209746125 0.211518166 0.215494209 0.217371934 0.217660133 0.220457525 0.224909531 0.226203372 0.231847991 0.234834600 0.235375444 0.235737972 0.244494218 0.255708168 0.257061520 0.262810094 0.269615163 0.280198816 0.282868618 0.286153354 0.291414640 0.296166456 0.304184833 0.305589563 0.307168465 0.313472673 0.316432245 0.317202269 0.321902927 0.329320260 0.332407166 0.351035289 0.351833140 0.354732266 0.355535597 0.359830207 0.362701141 0.363311065 0.384069006 0.385862024 0.391580779 0.410418896 0.425263159 0.429916768 0.458074424 0.468547481 0.476660969 0.481915959 0.483255078 0.487056881 0.490346038 0.508805334 0.514948987 0.534990416 0.566019894 0.572709084 0.591851554 0.593468731 0.606250421 0.607625907 0.644473904 0.646396605 0.648696715 0.674199978 0.677349835 0.684917613 0.691440164 0.693085606 0.699384964 0.704219190 0.716862108 0.741176928 0.751179604 0.758338991 0.767377624 0.772388316 0.778748181 0.810468560 0.812692198 0.817200497 0.821582768 0.822487915 0.830938154 0.831413195 0.835559071 0.836869461 0.845156153 0.846202685 0.848180068 0.858394063 0.864626758 0.865604192 0.873177826 0.881131089 0.884288797 0.889290038 0.891945885 0.900577439 0.903832666 0.920688081 0.923328088 0.933115220 0.935069744 0.964918559 0.975646337 0.985636405 1.000914810 1.017503518 1.027335415 1.041266028 1.050212163 1.057264891 1.068090215 1.086518423 1.088465164 1.103477835 1.106167331 1.112206643 1.119628240 1.123586850 1.135468421 1.143097827 1.173941270 1.175517538 1.180835200 1.186248488 1.189916330 1.195921639 1.223842439 1.227821075 1.274187637 1.300939737 1.318942055 1.328022822 1.332615965 1.334545441 1.335697861 1.340891105 1.342797593 1.344881436 1.358791419 1.377723743 1.382878223 1.384051122 1.413549072 1.419578631 1.435107085 1.551436882 1.674866032 1.774879495</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">180</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34270324" y3="0.03105294" z3="-0.19326807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38774688" y3="0.16375128" z3="0.41634516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64557403" y3="0.43600016" z3="-0.34041456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71866046" y3="1.22744912" z3="-2.25286103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38688218" y3="0.41329675" z3="-1.18232481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72163982" y3="0.83063784" z3="-3.6552164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61799414" y3="1.736975" z3="-3.11958118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35712233" y3="2.57252279" z3="-4.59021375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5498272" y3="1.23043589" z3="-4.36354363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47515891" y3="2.90486289" z3="-5.14660042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93038133" y3="-0.49999159" z3="-3.44573586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10023616" y3="0.01156424" z3="-1.00189216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40737182" y3="-1.12667636" z3="-2.01070896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93530406" y3="-1.00034292" z3="-1.83777604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11150091" y3="-2.45082827" z3="-1.86439757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14102779" y3="-3.6050189" z3="0.666949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02622672" y3="-5.28537376" z3="-4.73811118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25227567" y3="-5.01934959" z3="-3.70199922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84444069" y3="-4.30595502" z3="-1.08698897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77521642" y3="-4.61301226" z3="-2.8529587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5688726" y3="-5.09526825" z3="-3.24313303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86594034" y3="-4.73267485" z3="-1.93169318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49146878" y3="-4.27188902" z3="-1.52906853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80790987" y3="-4.5414616" z3="-3.20014878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37024872" y3="-5.40749915" z3="-3.91614187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90351416" y3="-4.75862437" z3="-1.58824865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03084591" y3="-3.84762901" z3="0.23093666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16960683" y3="-3.62761978" z3="0.87610751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05934397" y3="-4.08815236" z3="0.44452958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16386837" y3="-3.48632949" z3="2.34251196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22133822" y3="-3.28903419" z3="5.13965095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36253541" y3="-3.675214" z3="3.04610523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99396032" y3="-3.20540351" z3="3.06375048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01977416" y3="-3.10771751" z3="4.45197989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39055695" y3="-3.57835881" z3="4.43450593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27968918" y3="-3.90756048" z3="2.49838837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03258216" y3="-3.08581946" z3="2.55924773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0881372" y3="-2.91059665" z3="4.99032126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3308434" y3="-3.73632584" z3="4.96974319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.241227" y3="-3.22043599" z3="6.23091738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41588597" y3="-3.90930401" z3="-0.62816351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17730004" y3="-3.41484668" z3="-1.08492884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51706855" y3="0.22008172" z3="-4.71070468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07166323" y3="-1.69995218" z3="0.0120999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88925472" y3="-0.94370605" z3="1.16877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82300707" y3="-0.29756111" z3="1.49509753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3409673" y3="0.5636188" z3="1.20041697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40110925" y3="1.45174559" z3="-0.43265597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00050648" y3="-0.70102249" z3="1.39689524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32806911" y3="1.76747106" z3="2.63610558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86184507" y3="-0.92222997" z3="2.0690201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6256111" y3="-0.30213865" z3="3.32316542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18000926" y3="0.75057946" z3="-1.25472094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39698971" y3="2.22047083" z3="-0.43639932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36808294" y3="1.95927812" z3="-0.59546317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01831414" y3="-1.06224704" z3="2.4386159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97816544" y3="-0.24594246" z3="1.16462043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87530326" y3="-1.54417152" z3="0.69819735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39358652" y3="1.23626135" z3="3.60221498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.6121421" y3="2.34888118" z3="2.63502283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16515" y3="2.48579594" z3="2.57571138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76644768" y3="-0.7625843" z3="3.83681771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54082874" y3="-0.46442522" z3="3.90801551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44564447" y3="0.77791142" z3="3.19561416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84962208" y3="-0.73375329" z3="0.98705483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41680772" y3="-2.05790608" z3="0.84199412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7647235" y3="-2.70677436" z3="1.88325932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56372398" y3="-2.01896175" z3="3.07700692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05033115" y3="-0.7311398" z3="3.27825666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70172559" y3="-0.09564307" z3="2.22583429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51380966" y3="-2.55030406" z3="-0.12821145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36065799" y3="-3.71219905" z3="1.75346777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69860107" y3="-2.61819934" z3="4.09813542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87235153" y3="-0.2253434" z3="4.2269466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04914458" y3="0.93372351" z3="2.34548503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80380987" y3="0.43683337" z3="-4.29620897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77975117" y3="-0.53280573" z3="-4.4816738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42399994" y3="-1.72378446" z3="-5.1030384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13355982" y3="-1.95109262" z3="-5.57139755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83503298" y3="-0.97797451" z3="-5.3658188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0550736" y3="1.35915527" z3="-3.76634403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80162943" y3="-0.38954111" z3="-4.12906125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43241339" y3="-2.77569431" z3="-5.2508431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10273173" y3="-2.89102251" z3="-6.07054884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85942353" y3="-1.16133803" z3="-5.69344026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3733634" y3="-1.92605562" z3="5.0420512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31222286" y3="-3.75629804" z3="3.92302472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2007715" y3="-3.67882473" z3="-6.02572803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44032995" y3="-2.69035565" z3="-4.57788848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06256952" y3="1.17164591" z3="-1.48301955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09802845" y3="1.55996236" z3="-2.45798922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42778026" y3="1.51776336" z3="-1.67706928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83061922" y3="2.19940723" z3="-2.79906917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15715247" y3="1.22043165" z3="-0.91720184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88442356" y3="2.45569272" z3="-2.93995585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55110901" y3="2.24660367" z3="-3.61876197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87936874" y3="2.55714957" z3="-3.78445802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82716073" y3="2.51903521" z3="-4.39023904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2052513" y3="3.07921257" z3="-4.6883828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37262786" y3="3.14020239" z3="-3.30131942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25302688" y3="3.54955158" z3="-4.08399284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16906803" y3="4.15281589" z3="-2.6954258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90300083" y3="5.48571654" z3="-2.90249701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00044505" y3="3.86567323" z3="-2.04984162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53103021" y3="6.24287362" z3="-2.42408495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01303172" y3="4.93527415" z3="-4.29343488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82231716" y3="5.8867041" z3="-3.7233085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15845802" y3="5.23071447" z3="-4.90999438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62638924" y3="6.94976208" z3="-3.88783992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47308094" y3="-2.17103256" z3="-0.30172943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44985414" y3="-2.96765773" z3="-1.06460299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00205773" y3="-2.54552096" z3="0.58909738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0842438" y3="-1.35012212" z3="-0.72272586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16837699" y3="-1.41392239" z3="-1.16059435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29870648" y3="-0.37371432" z3="-1.51150407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09276847" y3="-1.54551844" z3="-0.95695299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41628318" y3="-2.06908761" z3="-2.00978308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3427,.0311,-.1933;7.3877,.1638,.4163;6.6456,.436,-.3404;4.7187,1.2274,-2.2529;4.3869,.4133,-1.1823;2.7216,.8306,-3.6552;3.618,1.737,-3.1196;1.3571,2.5725,-4.5902;1.5498,1.2304,-4.3635;.4752,2.9049,-5.1466;2.9304,-.5,-3.4457;3.1002,.0116,-1.0019;2.4074,-1.1267,-2.0107;.9353,-1.0003,-1.8378;3.1115,-2.4508,-1.8644;-.141,-3.605,.6669;-.0262,-5.2854,-4.7381;-.2523,-5.0193,-3.702;-.8444,-4.306,-1.087;.7752,-4.613,-2.853;-1.5689,-5.0953,-3.2431;-1.8659,-4.7327,-1.9317;.4915,-4.2719,-1.5291;1.8079,-4.5415,-3.2001;-2.3702,-5.4075,-3.9161;-2.9035,-4.7586,-1.5882;-1.0308,-3.8476,.2309;-2.1696,-3.6276,.8761;-3.0593,-4.0882,.4445;-2.1639,-3.4863,2.3425;-2.2213,-3.289,5.1397;-3.3625,-3.6752,3.0461;-.994,-3.2054,3.0638;-1.0198,-3.1077,4.452;-3.3906,-3.5784,4.4345;-4.2797,-3.9076,2.4984;-.0326,-3.0858,2.5592;-.0881,-2.9106,4.9903;-4.3308,-3.7363,4.9697;-2.2412,-3.2204,6.2309;1.4159,-3.9093,-.6282;2.1773,-3.4148,-1.0849;.5171,.2201,-4.7107;-3.0717,-1.7,.0121;-2.8893,-.9437,1.1688;-1.823,-.2976,1.4951;-.341,.5636,1.2004;-.4011,1.4517,-.4327;1.0005,-.701,1.3969;-.3281,1.7675,2.6361;-3.8618,-.9222,2.069;-3.6256,-.3021,3.3232;-.18,.7506,-1.2547;.397,2.2205,-.4364;-1.3681,1.9593,-.5955;1.0183,-1.0622,2.4386;1.9782,-.2459,1.1646;.8753,-1.5442,.6982;-.3936,1.2363,3.6022;.6121,2.3489,2.635;-1.1651,2.4858,2.5757;-2.7664,-.7626,3.8368;-4.5408,-.4644,3.908;-3.4456,.7779,3.1956;4.8496,-.7338,.9871;4.4168,-2.0579,.842;3.7647,-2.7068,1.8833;3.5637,-2.019,3.077;4.0503,-.7311,3.2783;4.7017,-.0956,2.2258;4.5138,-2.5503,-.1282;3.3607,-3.7122,1.7535;2.6986,-2.6182,4.0981;3.8724,-.2253,4.2269;5.0491,.9337,2.3455;-.8038,.4368,-4.2962;-1.7798,-.5328,-4.4817;-1.424,-1.7238,-5.103;-.1336,-1.9511,-5.5714;.835,-.978,-5.3658;-1.0551,1.3592,-3.7663;-2.8016,-.3895,-4.1291;-2.4324,-2.7757,-5.2508;.1027,-2.891,-6.0705;1.8594,-1.1613,-5.6934;2.3734,-1.9261,5.0421;2.3122,-3.7563,3.923;-2.2008,-3.6788,-6.0257;-3.4403,-2.6904,-4.5779;7.0626,1.1716,-1.483;6.098,1.56,-2.458;8.4278,1.5178,-1.6771;8.8306,2.1994,-2.7991;9.1572,1.2204,-.9172;9.8844,2.4557,-2.94;6.5511,2.2466,-3.6188;7.8794,2.5571,-3.7845;5.8272,2.519,-4.3902;8.2053,3.0792,-4.6884;3.3726,3.1402,-3.3013;2.253,3.5496,-4.084;4.1691,4.1528,-2.6954;3.903,5.4857,-2.9025;5.0004,3.8657,-2.0498;4.531,6.2429,-2.4241;2.013,4.9353,-4.2934;2.8223,5.8867,-3.7233;1.1585,5.2307,-4.91;2.6264,6.9498,-3.8878;-4.4731,-2.171,-.3017;-4.4499,-2.9677,-1.0646;-5.0021,-2.5455,.5891;-5.0842,-1.3501,-.7227;-2.1684,-1.4139,-1.1606;-2.2987,-.3737,-1.5115;-1.0928,-1.5455,-.957;-2.4163,-2.0691,-2.0098;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650394365426</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004781673424 0.000433178296 0.019774995378 0.005338911067</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030531079 -0.000811716 -0.000165335 0.000071948 0.000247620 0.000388535 0.000394467 0.000490059 0.000610738 0.000790757 0.000919283 0.001098311 0.001273234 0.001282631 0.001372500 0.001385822 0.001697413 0.001775070 0.001835410 0.001955719 0.002154291 0.002510321 0.002558034 0.002717651 0.002834820 0.003135777 0.003236336 0.003447285 0.003843394 0.003967163 0.004339713 0.004715669 0.004826953 0.005075307 0.005876388 0.006068527 0.006277232 0.006574965 0.006790913 0.007560167 0.008008886 0.008113354 0.009145881 0.009495988 0.009908401 0.010702221 0.011040597 0.011588721 0.011693006 0.012042858 0.012858226 0.013174817 0.013976642 0.014375066 0.014921292 0.015343148 0.015579258 0.015963282 0.016033952 0.016864065 0.017340834 0.017779231 0.018876951 0.019401474 0.019798850 0.020714451 0.021193257 0.021354721 0.022380624 0.023099643 0.025041355 0.025909285 0.026648918 0.026848799 0.027387997 0.029100562 0.029350773 0.031420960 0.033234581 0.033456125 0.033787537 0.035786124 0.036686341 0.037387821 0.039324493 0.039901416 0.040674355 0.041845384 0.042747496 0.044372462 0.045261338 0.046661164 0.047563434 0.049165487 0.050269337 0.050767895 0.051021866 0.051214948 0.052471358 0.052504219 0.052845768 0.052941965 0.054464606 0.054658118 0.055448316 0.056167226 0.056476424 0.056498470 0.056987234 0.058376987 0.060272704 0.060631407 0.061435341 0.062038985 0.063047785 0.064359786 0.065063734 0.065752487 0.066286885 0.067755197 0.068872809 0.070130952 0.072615687 0.074308200 0.074467189 0.076113972 0.077761747 0.083436982 0.085085220 0.086826182 0.087183416 0.087869268 0.090320246 0.090774242 0.092951707 0.094578188 0.095191655 0.096300755 0.097248861 0.097740780 0.098753892 0.099585468 0.100194791 0.102315250 0.102714802 0.103121497 0.103369023 0.103930240 0.105188646 0.106717475 0.107310378 0.108862380 0.109552873 0.110420289 0.112318166 0.112429177 0.113608977 0.114829714 0.116203854 0.118873179 0.120579860 0.121372745 0.122399526 0.124137399 0.125291372 0.126215959 0.126882955 0.131674834 0.134862567 0.135576011 0.142534398 0.143507435 0.146834886 0.147153681 0.149601777 0.151998540 0.154514871 0.155807237 0.156607114 0.161217768 0.161709667 0.173287359 0.173770684 0.179345419 0.183915697 0.185043229 0.188923688 0.189970985 0.193871633 0.193925296 0.198300257 0.200028537 0.204965766 0.206837587 0.207120491 0.209746126 0.211552965 0.215504129 0.217375905 0.217660326 0.220473798 0.224914372 0.226203434 0.231857391 0.234842674 0.235375495 0.235742203 0.244494222 0.255711884 0.257069497 0.262842673 0.269625783 0.280236933 0.282870369 0.286154119 0.291422333 0.296166351 0.304184796 0.305590526 0.307183439 0.313567997 0.316432278 0.317227057 0.321905038 0.329323339 0.332407189 0.351233101 0.351835723 0.354733067 0.355575646 0.359830773 0.362701163 0.363320724 0.384072962 0.385869350 0.391593375 0.410419984 0.425270101 0.429924324 0.458087045 0.468558675 0.476899853 0.482039454 0.483384537 0.487081096 0.490347445 0.508805946 0.514959410 0.534990521 0.566026042 0.572709049 0.591901221 0.593470056 0.606251212 0.607628988 0.644476567 0.646409675 0.648696749 0.674201762 0.677364429 0.684917893 0.691440314 0.693105110 0.699390723 0.704242354 0.716873802 0.741177003 0.751181681 0.758344572 0.767377715 0.772390197 0.778748352 0.810472032 0.812708768 0.817437521 0.821586907 0.822524983 0.831218739 0.831456138 0.835576801 0.836998351 0.845156240 0.846240399 0.848180759 0.858438636 0.864626545 0.865677733 0.873189146 0.881150384 0.884294659 0.889290235 0.891979165 0.900577202 0.903835576 0.920733467 0.923333518 0.933139561 0.935087989 0.964933874 0.975646333 0.985639451 1.000917902 1.017504792 1.027343840 1.041272399 1.050229655 1.057270916 1.068092393 1.086522159 1.088470808 1.103481901 1.106175446 1.112208863 1.119647441 1.123588345 1.135468412 1.143103922 1.173955313 1.175520173 1.180849845 1.186248574 1.189949186 1.195959644 1.223843807 1.227821198 1.274194310 1.300940712 1.318942007 1.328023041 1.332618600 1.334595867 1.335699078 1.340911598 1.342798440 1.344881601 1.358791614 1.377922219 1.382879121 1.384051278 1.413555852 1.419583950 1.435135354 1.551437700 1.676216925 1.774884299</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">181</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33849572" y3="0.030674" z3="-0.18977957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38243412" y3="0.16453754" z3="0.42313423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64139332" y3="0.43612704" z3="-0.33493748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71687677" y3="1.22549958" z3="-2.25085972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38399971" y3="0.41197508" z3="-1.1804674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72077756" y3="0.82902611" z3="-3.65485472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61737441" y3="1.73488791" z3="-3.11909301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35899557" y3="2.57057689" z3="-4.59336747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5497165" y3="1.22898801" z3="-4.36458021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47773769" y3="2.90357069" z3="-5.15034284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9284762" y3="-0.50121946" z3="-3.44514923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09736658" y3="0.00997577" z3="-1.00165605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40730051" y3="-1.12982692" z3="-2.01057312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93490014" y3="-1.00771817" z3="-1.83760368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11478187" y3="-2.45226486" z3="-1.86476263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1367254" y3="-3.60015783" z3="0.66225826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02180631" y3="-5.29202694" z3="-4.73862795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24858898" y3="-5.02221545" z3="-3.7036038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8408575" y3="-4.30174731" z3="-1.09082901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77998612" y3="-4.61884769" z3="-2.85392583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56595439" y3="-5.09196972" z3="-3.24639834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86277037" y3="-4.72603681" z3="-1.93596238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49555133" y3="-4.2733396" z3="-1.53123127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81516829" y3="-4.55610675" z3="-3.20019349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36821676" y3="-5.40210359" z3="-3.91962571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89961582" y3="-4.74949801" z3="-1.59391476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02689947" y3="-3.84230548" z3="0.22670599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16539305" y3="-3.62540282" z3="0.87338008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05479701" y3="-4.08658837" z3="0.44152785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15890995" y3="-3.48696459" z3="2.34003798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21536595" y3="-3.29706871" z3="5.1376542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.356966" y3="-3.67937725" z3="3.0437018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98858319" y3="-3.20678582" z3="3.06152228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01437353" y3="-3.11208814" z3="4.44991224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38418288" y3="-3.58671669" z3="4.43240796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27417716" y3="-3.91155214" z3="2.49580257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02713083" y3="-3.08561527" z3="2.55680502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08325986" y3="-2.91441825" z3="4.98866059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32363716" y3="-3.74827615" z3="4.96768642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23482576" y3="-3.23132917" z3="6.22907695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42053869" y3="-3.91350983" z3="-0.62969638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18204628" y3="-3.41873768" z3="-1.08602694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51519572" y3="0.22087326" z3="-4.70939094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07433659" y3="-1.69743516" z3="0.01418904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88704832" y3="-0.94114346" z3="1.170385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82118364" y3="-0.29163367" z3="1.49097446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33927218" y3="0.56909472" z3="1.19148832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39788185" y3="1.45013143" z3="-0.44552885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00076712" y3="-0.69581106" z3="1.39442046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32778123" y3="1.78036433" z3="2.62053095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85491678" y3="-0.92288291" z3="2.07585689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61311971" y3="-0.30589366" z3="3.3303591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18366802" y3="0.74473432" z3="-1.26719177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39636775" y3="2.21693529" z3="-0.45234265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36374878" y3="1.96139529" z3="-0.60686757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0147797" y3="-1.05571832" z3="2.43675097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97959324" y3="-0.2420919" z3="1.16403538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87604849" y3="-1.53938631" z3="0.696192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39126496" y3="1.25480126" z3="3.58987466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61075103" y3="2.3638163" z3="2.61524784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16632495" y3="2.49636194" z3="2.55678912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75064436" y3="-0.76646384" z3="3.83845165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52484169" y3="-0.47133882" z3="3.91951149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43588786" y3="0.77460068" z3="3.20477365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8436056" y3="-0.73378406" z3="0.98971574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41196311" y3="-2.05835204" z3="0.84435353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75967974" y3="-2.70777504" z3="1.88504457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55554637" y3="-2.01967208" z3="3.07703974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04199502" y3="-0.73130412" z3="3.27980001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69414126" y3="-0.09532796" z3="2.22825287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51353853" y3="-2.55162908" z3="-0.12322155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35980097" y3="-3.71412511" z3="1.75750336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6948702" y3="-2.62093622" z3="4.10071831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86584907" y3="-0.22637584" z3="4.23097016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04273919" y3="0.93442675" z3="2.34971417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80569931" y3="0.44109742" z3="-4.29602497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78372396" y3="-0.52749422" z3="-4.48190851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43009797" y3="-1.72037993" z3="-5.1027279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13948793" y3="-1.95162078" z3="-5.56817197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83119145" y3="-0.9791988" z3="-5.36109739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05561154" y3="1.36505404" z3="-3.76771266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80518455" y3="-0.38068377" z3="-4.13072263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44000906" y3="-2.77026594" z3="-5.24733328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09550479" y3="-2.89323124" z3="-6.06456165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85569676" y3="-1.16521915" z3="-5.68781804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36845624" y3="-1.92888961" z3="5.04665397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31865496" y3="-3.76100048" z3="3.93114983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2100765" y3="-3.67345477" z3="-6.02291365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44751475" y3="-2.68518531" z3="-4.57292876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05979987" y3="1.17137589" z3="-1.47725791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09650244" y3="1.55856082" z3="-2.45391623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42507705" y3="1.51807074" z3="-1.66936946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82934309" y3="2.20017393" z3="-2.79082073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15327155" y3="1.22079769" z3="-0.90843499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88308192" y3="2.45616288" z3="-2.93041006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5510003" y3="2.24514911" z3="-3.61419019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8795081" y3="2.55732482" z3="-3.77773701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8279874" y3="2.51678408" z3="-4.38685097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20653131" y3="3.07980014" z3="-4.68125382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3728817" y3="3.13837233" z3="-3.30153243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25469234" y3="3.54796424" z3="-4.08602275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16870844" y3="4.15111458" z3="-2.69493909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90395195" y3="5.4835558" z3="-2.90381734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99928846" y3="3.86381133" z3="-2.04824319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53150594" y3="6.24056136" z3="-2.42483941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01495916" y3="4.934348" z3="-4.29573743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8244144" y3="5.88511564" z3="-3.72598913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16135817" y3="5.22988283" z3="-4.91365581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62871827" y3="6.94846253" z3="-3.89108644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47710674" y3="-2.17101694" z3="-0.29171075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45706758" y3="-2.97010213" z3="-1.052725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00204184" y3="-2.54331193" z3="0.60300543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09025218" y3="-1.35116545" z3="-0.71186832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17791158" y3="-1.41067454" z3="-1.16433731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30989478" y3="-0.36991858" z3="-1.5133955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10034274" y3="-1.54298027" z3="-0.96781929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42959098" y3="-2.06555796" z3="-2.01157801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3385,.0307,-.1898;7.3824,.1645,.4231;6.6414,.4361,-.3349;4.7169,1.2255,-2.2509;4.384,.412,-1.1805;2.7208,.829,-3.6549;3.6174,1.7349,-3.1191;1.359,2.5706,-4.5934;1.5497,1.229,-4.3646;.4777,2.9036,-5.1503;2.9285,-.5012,-3.4451;3.0974,.01,-1.0017;2.4073,-1.1298,-2.0106;.9349,-1.0077,-1.8376;3.1148,-2.4523,-1.8648;-.1367,-3.6002,.6623;-.0218,-5.292,-4.7386;-.2486,-5.0222,-3.7036;-.8409,-4.3017,-1.0908;.78,-4.6188,-2.8539;-1.566,-5.092,-3.2464;-1.8628,-4.726,-1.936;.4956,-4.2733,-1.5312;1.8152,-4.5561,-3.2002;-2.3682,-5.4021,-3.9196;-2.8996,-4.7495,-1.5939;-1.0269,-3.8423,.2267;-2.1654,-3.6254,.8734;-3.0548,-4.0866,.4415;-2.1589,-3.487,2.34;-2.2154,-3.2971,5.1377;-3.357,-3.6794,3.0437;-.9886,-3.2068,3.0615;-1.0144,-3.1121,4.4499;-3.3842,-3.5867,4.4324;-4.2742,-3.9116,2.4958;-.0271,-3.0856,2.5568;-.0833,-2.9144,4.9887;-4.3236,-3.7483,4.9677;-2.2348,-3.2313,6.2291;1.4205,-3.9135,-.6297;2.182,-3.4187,-1.086;.5152,.2209,-4.7094;-3.0743,-1.6974,.0142;-2.887,-.9411,1.1704;-1.8212,-.2916,1.491;-.3393,.5691,1.1915;-.3979,1.4501,-.4455;1.0008,-.6958,1.3944;-.3278,1.7804,2.6205;-3.8549,-.9229,2.0759;-3.6131,-.3059,3.3304;-.1837,.7447,-1.2672;.3964,2.2169,-.4523;-1.3637,1.9614,-.6069;1.0148,-1.0557,2.4368;1.9796,-.2421,1.164;.876,-1.5394,.6962;-.3913,1.2548,3.5899;.6108,2.3638,2.6152;-1.1663,2.4964,2.5568;-2.7506,-.7665,3.8385;-4.5248,-.4713,3.9195;-3.4359,.7746,3.2048;4.8436,-.7338,.9897;4.412,-2.0584,.8444;3.7597,-2.7078,1.885;3.5555,-2.0197,3.077;4.042,-.7313,3.2798;4.6941,-.0953,2.2283;4.5135,-2.5516,-.1232;3.3598,-3.7141,1.7575;2.6949,-2.6209,4.1007;3.8658,-.2264,4.231;5.0427,.9344,2.3497;-.8057,.4411,-4.296;-1.7837,-.5275,-4.4819;-1.4301,-1.7204,-5.1027;-.1395,-1.9516,-5.5682;.8312,-.9792,-5.3611;-1.0556,1.3651,-3.7677;-2.8052,-.3807,-4.1307;-2.44,-2.7703,-5.2473;.0955,-2.8932,-6.0646;1.8557,-1.1652,-5.6878;2.3685,-1.9289,5.0467;2.3187,-3.761,3.9311;-2.2101,-3.6735,-6.0229;-3.4475,-2.6852,-4.5729;7.0598,1.1714,-1.4773;6.0965,1.5586,-2.4539;8.4251,1.5181,-1.6694;8.8293,2.2002,-2.7908;9.1533,1.2208,-.9084;9.8831,2.4562,-2.9304;6.551,2.2451,-3.6142;7.8795,2.5573,-3.7777;5.828,2.5168,-4.3869;8.2065,3.0798,-4.6813;3.3729,3.1384,-3.3015;2.2547,3.548,-4.086;4.1687,4.1511,-2.6949;3.904,5.4836,-2.9038;4.9993,3.8638,-2.0482;4.5315,6.2406,-2.4248;2.015,4.9343,-4.2957;2.8244,5.8851,-3.726;1.1614,5.2299,-4.9137;2.6287,6.9485,-3.8911;-4.4771,-2.171,-.2917;-4.4571,-2.9701,-1.0527;-5.002,-2.5433,.603;-5.0903,-1.3512,-.7119;-2.1779,-1.4107,-1.1643;-2.3099,-.3699,-1.5134;-1.1003,-1.543,-.9678;-2.4296,-2.0656,-2.0116;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650393911081</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004093615050 0.000421617382 0.018514392180 0.005334891902</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030531262 -0.000790726 -0.000132604 0.000047019 0.000246993 0.000389321 0.000394474 0.000490336 0.000610278 0.000790504 0.000922421 0.001098202 0.001272692 0.001282688 0.001372015 0.001385725 0.001697837 0.001775543 0.001834747 0.001955397 0.002159442 0.002510491 0.002558192 0.002719476 0.002836559 0.003135828 0.003240737 0.003447240 0.003842231 0.003970814 0.004339882 0.004715518 0.004826926 0.005082724 0.005889686 0.006069103 0.006281084 0.006574962 0.006792544 0.007561058 0.008014366 0.008124546 0.009147928 0.009496410 0.009912003 0.010708693 0.011042772 0.011592586 0.011694530 0.012077568 0.012858199 0.013173197 0.013976666 0.014374925 0.014921604 0.015346582 0.015580708 0.015980657 0.016037379 0.016866945 0.017342555 0.017829629 0.018878475 0.019402449 0.019799567 0.020732920 0.021197778 0.021354282 0.022380690 0.023104570 0.025057978 0.025909245 0.026649110 0.026853574 0.027388467 0.029106740 0.029352603 0.031423723 0.033234571 0.033460728 0.033810516 0.035790481 0.036748465 0.037391984 0.039340676 0.039907374 0.040709782 0.041888815 0.042753587 0.044376106 0.045272573 0.046663151 0.047575096 0.049170486 0.050271858 0.050779479 0.051022112 0.051215541 0.052471904 0.052507651 0.052846044 0.052941932 0.054466938 0.054665375 0.055448346 0.056167205 0.056479293 0.056498457 0.056987661 0.058377187 0.060274131 0.060639518 0.061435280 0.062050334 0.063051328 0.064359825 0.065065093 0.065753066 0.066286832 0.067762555 0.068874032 0.070132876 0.072628015 0.074317230 0.074467788 0.076120465 0.077761721 0.083463451 0.085095252 0.086826888 0.087191856 0.087894919 0.090322322 0.090774237 0.092953428 0.094578658 0.095194787 0.096306261 0.097254437 0.097750585 0.098757585 0.099585402 0.100197548 0.102317937 0.102716877 0.103131062 0.103375607 0.103932813 0.105270408 0.106717838 0.107310332 0.108933196 0.109722323 0.110466485 0.112318775 0.112488232 0.113669136 0.114830148 0.116215966 0.118881105 0.120580616 0.121384837 0.122411844 0.124177520 0.125320012 0.126217374 0.126889275 0.131680473 0.134866612 0.135575834 0.142560780 0.143508288 0.146842852 0.147153956 0.149603618 0.151999331 0.154550205 0.155834443 0.156607752 0.161231301 0.161717786 0.173293484 0.173775108 0.179354753 0.183916170 0.185047717 0.188924723 0.189971644 0.193879390 0.193926539 0.198301299 0.200032976 0.204996743 0.206842324 0.207120131 0.209746245 0.211577836 0.215519987 0.217386468 0.217660997 0.220487560 0.224921373 0.226203864 0.231866061 0.234849575 0.235375471 0.235748579 0.244494294 0.255715200 0.257082531 0.262888423 0.269640150 0.280258854 0.282872268 0.286155562 0.291430253 0.296172440 0.304184960 0.305593243 0.307196961 0.313666624 0.316432371 0.317239601 0.321905408 0.329325627 0.332407735 0.351382218 0.351842781 0.354736999 0.355604226 0.359831028 0.362701170 0.363325848 0.384081916 0.385893148 0.391604134 0.410420693 0.425273593 0.429923986 0.458086400 0.468563786 0.477100980 0.482173751 0.483449546 0.487095145 0.490347547 0.508808403 0.514959435 0.534993820 0.566031004 0.572709388 0.591954290 0.593470330 0.606252072 0.607634496 0.644480965 0.646427782 0.648696918 0.674203517 0.677390854 0.684919472 0.691444478 0.693133546 0.699393852 0.704261668 0.716892923 0.741177001 0.751181787 0.758363439 0.767379704 0.772390287 0.778748373 0.810474818 0.812714095 0.817704348 0.821591386 0.822580068 0.831376770 0.831626589 0.835613404 0.837232288 0.845157128 0.846267267 0.848180914 0.858494716 0.864627882 0.865731822 0.873202496 0.881170547 0.884305781 0.889291261 0.892012933 0.900578278 0.903836027 0.920775208 0.923339945 0.933158755 0.935102755 0.964958288 0.975646389 0.985642629 1.000922336 1.017504842 1.027348982 1.041280942 1.050243367 1.057274728 1.068105412 1.086526850 1.088474258 1.103491707 1.106185098 1.112212964 1.119664571 1.123599744 1.135468424 1.143104985 1.173977127 1.175524499 1.180860401 1.186248607 1.189993711 1.195980960 1.223850755 1.227822424 1.274195532 1.300941213 1.318943891 1.328024134 1.332618584 1.334669482 1.335701149 1.340968267 1.342799110 1.344881966 1.358792384 1.378062668 1.382880898 1.384055761 1.413656588 1.419584800 1.435172064 1.551439000 1.677253068 1.774884670</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">182</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33444523" y3="0.03094944" z3="-0.1865167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37773979" y3="0.16503477" z3="0.42865303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63766294" y3="0.43595634" z3="-0.33062765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71570945" y3="1.22406683" z3="-2.24955736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38131029" y3="0.41143905" z3="-1.17878835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71945763" y3="0.82855623" z3="-3.65418353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61704057" y3="1.73381704" z3="-3.11869829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36004978" y3="2.57225991" z3="-4.59354744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54899788" y3="1.23011711" z3="-4.36388761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47962593" y3="2.90592784" z3="-5.1514791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92635703" y3="-0.50217261" z3="-3.44486011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09431329" y3="0.00965415" z3="-1.00136879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40657141" y3="-1.13175895" z3="-2.01001329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93394662" y3="-1.01310272" z3="-1.83623466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11731436" y3="-2.45243416" z3="-1.8643386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1331312" y3="-3.59601133" z3="0.65761699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01630782" y3="-5.29448014" z3="-4.74087614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24344643" y3="-5.02325179" z3="-3.70637766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83735162" y3="-4.298451" z3="-1.09500712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78467349" y3="-4.62161372" z3="-2.85572713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56177517" y3="-5.08845971" z3="-3.25090911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85966045" y3="-4.71989468" z3="-1.94142763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49987176" y3="-4.27488345" z3="-1.53358327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81897359" y3="-4.55917835" z3="-3.20010082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36313313" y3="-5.39798305" z3="-3.92480132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89822659" y3="-4.73720112" z3="-1.60097573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02344456" y3="-3.83802747" z3="0.22220414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16159128" y3="-3.62548484" z3="0.87055645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05006431" y3="-4.08834493" z3="0.43885361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15407139" y3="-3.48971134" z3="2.33743341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20830642" y3="-3.30796528" z3="5.13568519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35071852" y3="-3.68804309" z3="3.04179055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98458813" y3="-3.20652654" z3="3.05838255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0087551" y3="-3.11678167" z3="4.44727029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37734198" y3="-3.59867796" z3="4.43067903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26769811" y3="-3.92182856" z3="2.49412172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02546609" y3="-3.07802089" z3="2.55283964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07763363" y3="-2.91787676" z3="4.98592293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31647955" y3="-3.76356847" z3="4.96638761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22683561" y3="-3.24547917" z3="6.22732841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42489763" y3="-3.91724201" z3="-0.63114441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18622213" y3="-3.42147298" z3="-1.08656801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51299509" y3="0.22237389" z3="-4.70929381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07780537" y3="-1.69840096" z3="0.01603872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88690516" y3="-0.94249752" z3="1.17172825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82109622" y3="-0.29008755" z3="1.48727228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.342305" y3="0.57409186" z3="1.18481339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40319688" y3="1.44823235" z3="-0.45572101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00074844" y3="-0.68654795" z3="1.39488599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33352336" y3="1.79323699" z3="2.60749571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85014576" y3="-0.92750992" z3="2.08239972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60232034" y3="-0.31301866" z3="3.33718997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18798829" y3="0.73989576" z3="-1.27292081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39911941" y3="2.21254436" z3="-0.467992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36787448" y3="1.95988685" z3="-0.6193715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01300419" y3="-1.04354714" z3="2.43815457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97911951" y3="-0.23165813" z3="1.16576058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87998002" y3="-1.53197738" z3="0.69856581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39602461" y3="1.27331565" z3="3.58000015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60416286" y3="2.37863924" z3="2.59849011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17353299" y3="2.50757361" z3="2.53914502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73637414" y3="-0.77363769" z3="3.83935373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51076245" y3="-0.4811298" z3="3.9310693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42679663" y3="0.76822753" z3="3.21349408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83913493" y3="-0.73249629" z3="0.99368653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40862369" y3="-2.05744057" z3="0.84969496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75767572" y3="-2.70656752" z3="1.89147546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55469967" y3="-2.01789064" z3="3.08423089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03820753" y3="-0.72869823" z3="3.28434202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68898632" y3="-0.09310055" z3="2.23162925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50824714" y3="-2.55078756" z3="-0.1194665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3571683" y3="-3.71338923" z3="1.76349378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69356556" y3="-2.61945314" z3="4.1072358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85920179" y3="-0.2224115" z3="4.23283879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03501086" y3="0.93700236" z3="2.35079769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80812326" y3="0.44585354" z3="-4.29834507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78762574" y3="-0.52046748" z3="-4.48048684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4358299" y3="-1.71520121" z3="-5.09657014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14553934" y3="-1.94922848" z3="-5.56281465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8269304" y3="-0.97951955" z3="-5.35870967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05677483" y3="1.37170758" z3="-3.77351346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80967801" y3="-0.3716598" z3="-4.13009864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44791669" y3="-2.76385906" z3="-5.24271594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08772331" y3="-2.89199496" z3="-6.05836179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85107827" y3="-1.16842501" z3="-5.68412891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36263517" y3="-1.92593972" z3="5.04848185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31687617" y3="-3.76116389" z3="3.9369961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22176667" y3="-3.66607423" z3="-6.02045933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45281078" y3="-2.67705552" z3="-4.56578348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0577254" y3="1.16957998" z3="-1.47338087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09577295" y3="1.55611913" z3="-2.4516083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42352061" y3="1.51509036" z3="-1.66437394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82944591" y3="2.19413284" z3="-2.78667802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15079831" y3="1.21913614" z3="-0.90194568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88380952" y3="2.45029892" z3="-2.92515948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55207473" y3="2.24041251" z3="-3.61242169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88082762" y3="2.55006526" z3="-3.77526569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8301306" y3="2.5115017" z3="-4.38626453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20923775" y3="3.07037844" z3="-4.67931177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37452086" y3="3.13744325" z3="-3.30235222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25746754" y3="3.54803768" z3="-4.08794481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17128814" y3="4.14951127" z3="-2.69581989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90835942" y3="5.48245384" z3="-2.90545083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00079853" y3="3.86154866" z3="-2.04814126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5367657" y3="6.2387445" z3="-2.42670495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02081768" y3="4.93388414" z3="-4.30020866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83042845" y3="5.88465011" z3="-3.72933368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16817326" y3="5.23021032" z3="-4.91903601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63692295" y3="6.9478299" z3="-3.89583598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48032051" y3="-2.1747164" z3="-0.28469496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46073022" y3="-2.9735442" z3="-1.04512512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00128423" y3="-2.54803748" z3="0.61126079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09674904" y3="-1.35669266" z3="-0.70347681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18589591" y3="-1.41000656" z3="-1.16496883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31881887" y3="-0.36833786" z3="-1.51241938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10846619" y3="-1.54252713" z3="-0.97120445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44128882" y3="-2.06409487" z3="-2.01230489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3344,.0309,-.1865;7.3777,.165,.4287;6.6377,.436,-.3306;4.7157,1.2241,-2.2496;4.3813,.4114,-1.1788;2.7195,.8286,-3.6542;3.617,1.7338,-3.1187;1.36,2.5723,-4.5935;1.549,1.2301,-4.3639;.4796,2.9059,-5.1515;2.9264,-.5022,-3.4449;3.0943,.0097,-1.0014;2.4066,-1.1318,-2.01;.9339,-1.0131,-1.8362;3.1173,-2.4524,-1.8643;-.1331,-3.596,.6576;-.0163,-5.2945,-4.7409;-.2434,-5.0233,-3.7064;-.8374,-4.2985,-1.095;.7847,-4.6216,-2.8557;-1.5618,-5.0885,-3.2509;-1.8597,-4.7199,-1.9414;.4999,-4.2749,-1.5336;1.819,-4.5592,-3.2001;-2.3631,-5.398,-3.9248;-2.8982,-4.7372,-1.601;-1.0234,-3.838,.2222;-2.1616,-3.6255,.8706;-3.0501,-4.0883,.4389;-2.1541,-3.4897,2.3374;-2.2083,-3.308,5.1357;-3.3507,-3.688,3.0418;-.9846,-3.2065,3.0584;-1.0088,-3.1168,4.4473;-3.3773,-3.5987,4.4307;-4.2677,-3.9218,2.4941;-.0255,-3.078,2.5528;-.0776,-2.9179,4.9859;-4.3165,-3.7636,4.9664;-2.2268,-3.2455,6.2273;1.4249,-3.9172,-.6311;2.1862,-3.4215,-1.0866;.513,.2224,-4.7093;-3.0778,-1.6984,.016;-2.8869,-.9425,1.1717;-1.8211,-.2901,1.4873;-.3423,.5741,1.1848;-.4032,1.4482,-.4557;1.0007,-.6865,1.3949;-.3335,1.7932,2.6075;-3.8501,-.9275,2.0824;-3.6023,-.313,3.3372;-.188,.7399,-1.2729;.3991,2.2125,-.468;-1.3679,1.9599,-.6194;1.013,-1.0435,2.4382;1.9791,-.2317,1.1658;.88,-1.532,.6986;-.396,1.2733,3.58;.6042,2.3786,2.5985;-1.1735,2.5076,2.5391;-2.7364,-.7736,3.8394;-4.5108,-.4811,3.9311;-3.4268,.7682,3.2135;4.8391,-.7325,.9937;4.4086,-2.0574,.8497;3.7577,-2.7066,1.8915;3.5547,-2.0179,3.0842;4.0382,-.7287,3.2843;4.689,-.0931,2.2316;4.5082,-2.5508,-.1195;3.3572,-3.7134,1.7635;2.6936,-2.6195,4.1072;3.8592,-.2224,4.2328;5.035,.937,2.3508;-.8081,.4459,-4.2983;-1.7876,-.5205,-4.4805;-1.4358,-1.7152,-5.0966;-.1455,-1.9492,-5.5628;.8269,-.9795,-5.3587;-1.0568,1.3717,-3.7735;-2.8097,-.3717,-4.1301;-2.4479,-2.7639,-5.2427;.0877,-2.892,-6.0584;1.8511,-1.1684,-5.6841;2.3626,-1.9259,5.0485;2.3169,-3.7612,3.937;-2.2218,-3.6661,-6.0205;-3.4528,-2.6771,-4.5658;7.0577,1.1696,-1.4734;6.0958,1.5561,-2.4516;8.4235,1.5151,-1.6644;8.8294,2.1941,-2.7867;9.1508,1.2191,-.9019;9.8838,2.4503,-2.9252;6.5521,2.2404,-3.6124;7.8808,2.5501,-3.7753;5.8301,2.5115,-4.3863;8.2092,3.0704,-4.6793;3.3745,3.1374,-3.3024;2.2575,3.548,-4.0879;4.1713,4.1495,-2.6958;3.9084,5.4825,-2.9055;5.0008,3.8615,-2.0481;4.5368,6.2387,-2.4267;2.0208,4.9339,-4.3002;2.8304,5.8847,-3.7293;1.1682,5.2302,-4.919;2.6369,6.9478,-3.8958;-4.4803,-2.1747,-.2847;-4.4607,-2.9735,-1.0451;-5.0013,-2.548,.6113;-5.0967,-1.3567,-.7035;-2.1859,-1.41,-1.165;-2.3188,-.3683,-1.5124;-1.1085,-1.5425,-.9712;-2.4413,-2.0641,-2.0123;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650392432757</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003759777420 0.000403181706 0.019128130631 0.005336244200</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030531949 -0.000821502 -0.000050503 0.000046363 0.000247134 0.000388873 0.000394501 0.000494288 0.000610236 0.000796053 0.000921015 0.001099006 0.001272925 0.001284758 0.001371966 0.001385691 0.001697244 0.001775738 0.001835309 0.001955033 0.002161061 0.002511779 0.002558661 0.002720586 0.002838044 0.003136137 0.003240218 0.003448147 0.003842597 0.003979378 0.004339207 0.004716008 0.004827036 0.005088026 0.005899392 0.006071267 0.006281724 0.006575346 0.006794619 0.007567794 0.008019180 0.008136606 0.009152923 0.009496519 0.009914419 0.010710846 0.011042758 0.011593486 0.011700998 0.012128419 0.012859109 0.013173795 0.013976809 0.014374886 0.014922872 0.015349475 0.015582213 0.015999966 0.016038293 0.016866580 0.017343425 0.017874986 0.018884229 0.019403348 0.019799625 0.020745433 0.021202471 0.021354797 0.022382864 0.023110340 0.025074159 0.025909284 0.026649130 0.026855690 0.027388324 0.029107772 0.029357189 0.031424979 0.033235046 0.033463587 0.033827841 0.035794969 0.036787099 0.037396037 0.039348429 0.039911144 0.040727925 0.041929777 0.042754873 0.044381607 0.045284284 0.046668159 0.047579656 0.049173756 0.050273057 0.050786658 0.051022442 0.051215715 0.052472512 0.052512491 0.052846018 0.052941935 0.054467749 0.054671097 0.055448714 0.056167263 0.056481723 0.056498651 0.056988143 0.058378088 0.060274454 0.060641216 0.061440615 0.062058246 0.063052662 0.064360191 0.065065044 0.065755503 0.066286910 0.067764930 0.068874860 0.070138302 0.072640158 0.074322860 0.074468656 0.076126194 0.077762439 0.083482373 0.085111109 0.086828430 0.087196758 0.087913727 0.090323570 0.090776305 0.092956068 0.094578842 0.095196832 0.096309649 0.097258474 0.097767344 0.098764430 0.099585399 0.100199177 0.102320605 0.102716876 0.103141839 0.103387049 0.103933466 0.105361856 0.106719543 0.107311969 0.109014493 0.109899964 0.110508152 0.112319488 0.112533491 0.113714899 0.114831046 0.116225247 0.118882021 0.120581038 0.121410260 0.122419136 0.124210749 0.125350845 0.126219278 0.126894696 0.131691448 0.134871150 0.135576386 0.142583425 0.143508481 0.146851292 0.147156888 0.149605469 0.152001059 0.154570663 0.155853270 0.156608917 0.161243909 0.161724016 0.173298075 0.173783173 0.179361324 0.183917353 0.185048322 0.188929836 0.189972481 0.193885117 0.193927191 0.198301653 0.200038981 0.205021920 0.206844324 0.207121551 0.209747020 0.211581686 0.215547191 0.217393338 0.217665297 0.220505907 0.224926704 0.226204111 0.231871389 0.234855368 0.235375500 0.235759361 0.244495618 0.255720815 0.257097340 0.262944744 0.269653806 0.280273317 0.282872619 0.286157020 0.291438658 0.296192776 0.304185500 0.305595981 0.307206467 0.313755762 0.316432375 0.317254083 0.321905414 0.329325832 0.332408425 0.351489022 0.351859498 0.354740135 0.355632545 0.359841006 0.362701208 0.363325623 0.384096689 0.385918987 0.391611313 0.410424124 0.425274518 0.429924182 0.458086357 0.468570385 0.477215992 0.482301840 0.483494157 0.487106861 0.490348620 0.508820549 0.514959498 0.534995721 0.566038775 0.572709385 0.591979913 0.593470306 0.606253704 0.607646451 0.644486113 0.646435150 0.648703330 0.674203620 0.677417434 0.684919682 0.691452448 0.693161013 0.699395327 0.704281787 0.716921693 0.741177007 0.751181890 0.758399442 0.767380482 0.772390309 0.778748444 0.810474749 0.812721592 0.817940068 0.821596491 0.822633256 0.831405363 0.831870917 0.835654739 0.837533405 0.845167227 0.846268279 0.848181842 0.858527661 0.864641015 0.865771476 0.873216580 0.881179343 0.884318139 0.889291244 0.892035434 0.900578226 0.903838723 0.920778643 0.923345753 0.933171406 0.935115067 0.965004136 0.975647128 0.985643961 1.000926678 1.017505731 1.027352140 1.041292164 1.050261734 1.057280188 1.068118798 1.086530461 1.088476521 1.103496233 1.106191332 1.112219144 1.119666839 1.123621272 1.135469267 1.143106314 1.174002544 1.175525777 1.180875755 1.186248743 1.190034425 1.195993664 1.223863607 1.227822673 1.274196846 1.300956367 1.318944669 1.328027839 1.332619735 1.334750273 1.335705711 1.341059799 1.342801874 1.344883123 1.358797241 1.378210166 1.382892005 1.384062270 1.413797652 1.419586278 1.435201485 1.551439393 1.678132834 1.774894471</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">183</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33352087" y3="0.03138819" z3="-0.18448274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37696895" y3="0.16359567" z3="0.43050033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63729215" y3="0.43423614" z3="-0.32926236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71629606" y3="1.22205489" z3="-2.24931619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38090875" y3="0.41131949" z3="-1.17746242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71874732" y3="0.82873078" z3="-3.65279281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61828286" y3="1.73282579" z3="-3.11863967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3625065" y3="2.57330177" z3="-4.59417272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54866116" y3="1.2314309" z3="-4.36271223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48226669" y3="2.90814003" z3="-5.1517739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92342574" y3="-0.50204198" z3="-3.44303113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09351917" y3="0.01071746" z3="-0.99982966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40642622" y3="-1.131931" z3="-2.00745373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9337806" y3="-1.01598779" z3="-1.83178789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1195541" y3="-2.45150276" z3="-1.86280986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.12960822" y3="-3.59359017" z3="0.65367414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01105442" y3="-5.29196082" z3="-4.74436627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23909397" y3="-5.02021467" z3="-3.71011305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83398658" y3="-4.29581219" z3="-1.09884505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78924124" y3="-4.62111099" z3="-2.85819207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55780462" y3="-5.08351693" z3="-3.25586066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85609273" y3="-4.71513326" z3="-1.94638119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50364584" y3="-4.27427986" z3="-1.53615271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82532612" y3="-4.56308471" z3="-3.20185125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36031125" y3="-5.39017801" z3="-3.93067833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89420686" y3="-4.73223622" z3="-1.60725394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01992464" y3="-3.83663053" z3="0.21878116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1580262" y3="-3.62762259" z3="0.86831456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04576811" y3="-4.09206113" z3="0.43653655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15023077" y3="-3.4931682" z3="2.33528303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20371712" y3="-3.31540546" z3="5.13372049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34576262" y3="-3.69733011" z3="3.04012983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98097763" y3="-3.20626238" z3="3.05590898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0053837" y3="-3.11771523" z3="4.44474188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37144523" y3="-3.61076884" z3="4.42925855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26185922" y3="-3.93472321" z3="2.49288982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02102157" y3="-3.07527683" z3="2.54962361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07524784" y3="-2.91497262" z3="4.9833377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30845261" y3="-3.78240169" z3="4.96533216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22151886" y3="-3.25509672" z3="6.22550255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42902582" y3="-3.91983098" z3="-0.63246723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1901456" y3="-3.42260361" z3="-1.08672388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51063328" y3="0.2261981" z3="-4.70531233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07959957" y3="-1.70131348" z3="0.01611619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88733315" y3="-0.94709365" z3="1.17249038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82171195" y3="-0.2938749" z3="1.48663953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34807236" y3="0.57845985" z3="1.18328887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40937012" y3="1.44679003" z3="-0.46068487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99991753" y3="-0.67584326" z3="1.39950245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34852752" y3="1.80283068" z3="2.60111007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84854534" y3="-0.93523641" z3="2.08505917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59931781" y3="-0.32309772" z3="3.34036547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1913411" y3="0.73615747" z3="-1.27657672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38118244" y3="2.21740172" z3="-0.47259624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37757486" y3="1.95179154" z3="-0.62680955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01078027" y3="-1.0316281" z3="2.44334128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97753563" y3="-0.21844405" z3="1.17172495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88208341" y3="-1.52288833" z3="0.70400243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40853586" y3="1.28665324" z3="3.5755991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58527267" y3="2.39377322" z3="2.59071452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19266112" y3="2.51140472" z3="2.52926775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73137719" y3="-0.78293559" z3="3.83953521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.50580346" y3="-0.49478235" z3="3.9357542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42692641" y3="0.75872346" z3="3.21855578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83681728" y3="-0.7297834" z3="0.99640417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40431284" y3="-2.05437346" z3="0.85335088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75279271" y3="-2.70190836" z3="1.89562337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55021722" y3="-2.01180221" z3="3.08696223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03623702" y3="-0.72291167" z3="3.2868467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68765602" y3="-0.08887726" z3="2.23365172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50514946" y3="-2.5491699" z3="-0.11389573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35264389" y3="-3.70868381" z3="1.76985398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69201828" y3="-2.61267698" z3="4.11283196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86033838" y3="-0.21617864" z3="4.2368548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0359965" y3="0.94102358" z3="2.35264031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80935532" y3="0.45199053" z3="-4.29223839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79058974" y3="-0.51396351" z3="-4.47627115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44077007" y3="-1.70906097" z3="-5.0946526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15116421" y3="-1.94553219" z3="-5.55965914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82268326" y3="-0.97623555" z3="-5.35507997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05639724" y3="1.37818075" z3="-3.76670997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81150574" y3="-0.36296792" z3="-4.12538439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45370095" y3="-2.75592307" z3="-5.23707088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08042411" y3="-2.88882118" z3="-6.05413306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84640593" y3="-1.16650901" z3="-5.68132837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3627733" y3="-1.9183837" z3="5.05577495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31988287" y3="-3.75501958" z3="3.9472045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22980124" y3="-3.65728788" z3="-6.01612738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45743312" y3="-2.67048926" z3="-4.55685963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05841202" y3="1.16494416" z3="-1.47351232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09688595" y3="1.55137054" z3="-2.45220313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4247942" y3="1.50747473" z3="-1.66565992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83186281" y3="2.18462719" z3="-2.78925216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15156173" y3="1.21090963" z3="-0.90308093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88640491" y3="2.43672528" z3="-2.92912804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55411148" y3="2.23302614" z3="-3.61439485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88373044" y3="2.54092332" z3="-3.77811385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83235772" y3="2.50410398" z3="-4.38843209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21297685" y3="3.05901425" z3="-4.6833374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37851645" y3="3.13669242" z3="-3.30384128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26179035" y3="3.54855815" z3="-4.08925332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17774835" y3="4.14780185" z3="-2.69913983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91738145" y3="5.48085225" z3="-2.91041136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00686596" y3="3.85912683" z3="-2.05126502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54698363" y3="6.23693047" z3="-2.43212692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02716343" y3="4.93521592" z3="-4.30219154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83972899" y3="5.8842598" z3="-3.73410684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17497153" y3="5.23235887" z3="-4.9212572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64788575" y3="6.9478716" z3="-3.90147062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48224874" y3="-2.17998617" z3="-0.28146348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46448297" y3="-2.97912824" z3="-1.04263307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00015596" y3="-2.55397422" z3="0.61645924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10132863" y3="-1.3627429" z3="-0.69805965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19151535" y3="-1.40989242" z3="-1.16715981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32948844" y3="-0.36954917" z3="-1.51362583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11250578" y3="-1.54026327" z3="-0.97749307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44813071" y3="-2.06355562" z3="-2.01468384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3335,.0314,-.1845;7.377,.1636,.4305;6.6373,.4342,-.3293;4.7163,1.2221,-2.2493;4.3809,.4113,-1.1775;2.7187,.8287,-3.6528;3.6183,1.7328,-3.1186;1.3625,2.5733,-4.5942;1.5487,1.2314,-4.3627;.4823,2.9081,-5.1518;2.9234,-.502,-3.443;3.0935,.0107,-.9998;2.4064,-1.1319,-2.0075;.9338,-1.016,-1.8318;3.1196,-2.4515,-1.8628;-.1296,-3.5936,.6537;-.0111,-5.292,-4.7444;-.2391,-5.0202,-3.7101;-.834,-4.2958,-1.0988;.7892,-4.6211,-2.8582;-1.5578,-5.0835,-3.2559;-1.8561,-4.7151,-1.9464;.5036,-4.2743,-1.5362;1.8253,-4.5631,-3.2019;-2.3603,-5.3902,-3.9307;-2.8942,-4.7322,-1.6073;-1.0199,-3.8366,.2188;-2.158,-3.6276,.8683;-3.0458,-4.0921,.4365;-2.1502,-3.4932,2.3353;-2.2037,-3.3154,5.1337;-3.3458,-3.6973,3.0401;-.981,-3.2063,3.0559;-1.0054,-3.1177,4.4447;-3.3714,-3.6108,4.4293;-4.2619,-3.9347,2.4929;-.021,-3.0753,2.5496;-.0752,-2.915,4.9833;-4.3085,-3.7824,4.9653;-2.2215,-3.2551,6.2255;1.429,-3.9198,-.6325;2.1901,-3.4226,-1.0867;.5106,.2262,-4.7053;-3.0796,-1.7013,.0161;-2.8873,-.9471,1.1725;-1.8217,-.2939,1.4866;-.3481,.5785,1.1833;-.4094,1.4468,-.4607;.9999,-.6758,1.3995;-.3485,1.8028,2.6011;-3.8485,-.9352,2.0851;-3.5993,-.3231,3.3404;-.1913,.7362,-1.2766;.3812,2.2174,-.4726;-1.3776,1.9518,-.6268;1.0108,-1.0316,2.4433;1.9775,-.2184,1.1717;.8821,-1.5229,.704;-.4085,1.2867,3.5756;.5853,2.3938,2.5907;-1.1927,2.5114,2.5293;-2.7314,-.7829,3.8395;-4.5058,-.4948,3.9358;-3.4269,.7587,3.2186;4.8368,-.7298,.9964;4.4043,-2.0544,.8534;3.7528,-2.7019,1.8956;3.5502,-2.0118,3.087;4.0362,-.7229,3.2868;4.6877,-.0889,2.2337;4.5051,-2.5492,-.1139;3.3526,-3.7087,1.7699;2.692,-2.6127,4.1128;3.8603,-.2162,4.2369;5.036,.941,2.3526;-.8094,.452,-4.2922;-1.7906,-.514,-4.4763;-1.4408,-1.7091,-5.0947;-.1512,-1.9455,-5.5597;.8227,-.9762,-5.3551;-1.0564,1.3782,-3.7667;-2.8115,-.363,-4.1254;-2.4537,-2.7559,-5.2371;.0804,-2.8888,-6.0541;1.8464,-1.1665,-5.6813;2.3628,-1.9184,5.0558;2.3199,-3.755,3.9472;-2.2298,-3.6573,-6.0161;-3.4574,-2.6705,-4.5569;7.0584,1.1649,-1.4735;6.0969,1.5514,-2.4522;8.4248,1.5075,-1.6657;8.8319,2.1846,-2.7893;9.1516,1.2109,-.9031;9.8864,2.4367,-2.9291;6.5541,2.233,-3.6144;7.8837,2.5409,-3.7781;5.8324,2.5041,-4.3884;8.213,3.059,-4.6833;3.3785,3.1367,-3.3038;2.2618,3.5486,-4.0893;4.1777,4.1478,-2.6991;3.9174,5.4809,-2.9104;5.0069,3.8591,-2.0513;4.547,6.2369,-2.4321;2.0272,4.9352,-4.3022;2.8397,5.8843,-3.7341;1.175,5.2324,-4.9213;2.6479,6.9479,-3.9015;-4.4822,-2.18,-.2815;-4.4645,-2.9791,-1.0426;-5.0002,-2.554,.6165;-5.1013,-1.3627,-.6981;-2.1915,-1.4099,-1.1672;-2.3295,-.3695,-1.5136;-1.1125,-1.5403,-.9775;-2.4481,-2.0636,-2.0147;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650392742988</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002551892940 0.000374025719 0.020421756659 0.005333785249</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030531853 -0.000752139 -0.000023465 0.000100537 0.000248670 0.000388436 0.000397381 0.000492834 0.000610313 0.000796340 0.000919951 0.001099642 0.001274086 0.001287914 0.001372183 0.001386275 0.001698322 0.001778114 0.001834660 0.001954965 0.002161494 0.002511247 0.002561168 0.002719679 0.002843867 0.003136601 0.003240402 0.003448779 0.003845588 0.003984392 0.004338964 0.004720343 0.004827585 0.005089258 0.005906561 0.006072451 0.006283027 0.006577378 0.006797190 0.007575057 0.008019683 0.008142723 0.009162793 0.009496792 0.009917426 0.010710986 0.011043284 0.011593504 0.011703902 0.012160063 0.012859365 0.013174699 0.013977583 0.014375258 0.014928653 0.015350730 0.015584502 0.016025589 0.016039540 0.016866553 0.017343363 0.017903873 0.018892807 0.019403640 0.019800758 0.020754824 0.021206667 0.021355660 0.022386808 0.023113510 0.025087586 0.025909786 0.026649183 0.026858755 0.027388279 0.029107781 0.029362320 0.031426136 0.033235637 0.033466152 0.033837849 0.035797895 0.036809156 0.037396187 0.039354386 0.039912624 0.040738068 0.041968289 0.042756974 0.044386662 0.045288484 0.046674909 0.047581989 0.049175036 0.050277319 0.050791437 0.051022683 0.051216073 0.052472979 0.052517471 0.052846191 0.052941930 0.054468473 0.054674452 0.055449709 0.056168058 0.056484374 0.056498815 0.056989248 0.058379173 0.060274573 0.060641663 0.061455773 0.062059615 0.063053389 0.064360648 0.065066374 0.065760011 0.066286665 0.067765874 0.068875585 0.070146043 0.072651179 0.074326923 0.074468692 0.076129603 0.077765895 0.083502240 0.085119684 0.086832257 0.087201881 0.087917192 0.090323500 0.090781579 0.092958629 0.094578846 0.095197840 0.096311013 0.097264318 0.097786800 0.098773112 0.099585400 0.100200410 0.102320372 0.102717021 0.103152359 0.103399099 0.103934284 0.105458379 0.106723249 0.107317023 0.109101823 0.110116807 0.110555077 0.112321041 0.112567900 0.113764719 0.114832504 0.116235964 0.118882067 0.120581167 0.121444574 0.122421982 0.124239579 0.125374301 0.126221075 0.126896587 0.131700316 0.134872908 0.135577068 0.142596034 0.143508789 0.146856963 0.147162758 0.149605416 0.152004273 0.154598500 0.155872737 0.156610631 0.161259487 0.161728621 0.173305361 0.173793245 0.179361915 0.183919001 0.185048652 0.188943239 0.189973357 0.193887235 0.193928942 0.198301664 0.200050232 0.205055039 0.206844967 0.207123969 0.209748057 0.211581587 0.215574702 0.217407138 0.217671292 0.220514997 0.224931687 0.226205192 0.231874941 0.234857455 0.235375974 0.235764848 0.244498328 0.255724159 0.257110317 0.262998881 0.269668724 0.280278028 0.282872714 0.286158143 0.291445647 0.296218816 0.304186867 0.305598780 0.307210008 0.313821162 0.316432369 0.317260535 0.321906495 0.329326095 0.332409208 0.351545142 0.351873169 0.354745758 0.355645521 0.359846272 0.362701263 0.363326156 0.384101680 0.385951994 0.391613608 0.410426939 0.425274619 0.429932444 0.458103644 0.468570929 0.477308809 0.482407888 0.483502396 0.487107765 0.490354012 0.508846144 0.514969667 0.535003627 0.566042855 0.572709408 0.592002070 0.593472447 0.606255851 0.607672072 0.644491320 0.646448227 0.648705318 0.674206807 0.677457216 0.684920628 0.691467775 0.693217532 0.699398178 0.704294738 0.716963098 0.741177040 0.751184385 0.758444211 0.767398372 0.772394206 0.778749788 0.810474782 0.812726716 0.818133165 0.821600093 0.822690424 0.831415532 0.832119180 0.835694225 0.837980287 0.845186456 0.846268985 0.848186749 0.858561079 0.864665081 0.865792999 0.873226052 0.881182887 0.884326801 0.889291224 0.892041010 0.900579658 0.903838682 0.920780299 0.923350572 0.933171331 0.935120986 0.965046323 0.975649848 0.985643977 1.000929360 1.017514920 1.027352117 1.041304600 1.050267998 1.057283602 1.068142602 1.086533517 1.088480136 1.103502983 1.106203119 1.112227724 1.119667066 1.123661129 1.135469499 1.143107940 1.174028057 1.175567960 1.180887662 1.186249636 1.190074636 1.195997528 1.223882285 1.227822848 1.274200858 1.300962920 1.318944863 1.328027797 1.332620615 1.334833115 1.335720475 1.341166982 1.342812059 1.344885289 1.358805328 1.378282195 1.382898429 1.384077091 1.413980599 1.419586445 1.435220334 1.551440795 1.678587970 1.774921460</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">184</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33583668" y3="0.03218287" z3="-0.18513553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38035569" y3="0.1602678" z3="0.42697767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64036163" y3="0.43189433" z3="-0.33207547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71888655" y3="1.22179247" z3="-2.2507431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38304759" y3="0.41321046" z3="-1.17744412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7186429" y3="0.83114947" z3="-3.65103543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6207887" y3="1.73386338" z3="-3.11924104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36369545" y3="2.57796592" z3="-4.5910511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54833289" y3="1.23568787" z3="-4.35932563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4834511" y3="2.91381485" z3="-5.14794748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92123893" y3="-0.49979563" z3="-3.44040482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09514124" y3="0.01552651" z3="-0.99809699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40586238" y3="-1.12752832" z3="-2.0033858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93359668" y3="-1.01045193" z3="-1.8255238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11866709" y3="-2.44724772" z3="-1.85880941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1296759" y3="-3.59497892" z3="0.6530411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0063683" y3="-5.28653798" z3="-4.74664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23488496" y3="-5.0172732" z3="-3.71192218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8320351" y3="-4.29730593" z3="-1.10006049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79234859" y3="-4.61789786" z3="-2.8590653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55366593" y3="-5.08330717" z3="-3.25825067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85308362" y3="-4.71729211" z3="-1.94842938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50572545" y3="-4.27358075" z3="-1.53662968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82737767" y3="-4.55591707" z3="-3.20207301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35410645" y3="-5.39150752" z3="-3.93365035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89184426" y3="-4.73514804" z3="-1.60948774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.01956705" y3="-3.83858081" z3="0.21743909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15819528" y3="-3.63107942" z3="0.86653671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0451456" y3="-4.09711578" z3="0.4350094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.14986833" y3="-3.49733337" z3="2.33363706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20232523" y3="-3.3217229" z3="5.13226612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34380437" y3="-3.70748716" z3="3.03899237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98197451" y3="-3.20481983" z3="3.05370972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00539404" y3="-3.11814674" z3="4.44283807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.36958597" y3="-3.62119535" z3="4.42807082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.25929168" y3="-3.94843876" z3="2.49193933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0251251" y3="-3.06494692" z3="2.54718723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07569672" y3="-2.91189567" z3="4.98128093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30659686" y3="-3.79553562" z3="4.96456969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22008367" y3="-3.26161457" z3="6.22401715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4291934" y3="-3.9182404" z3="-0.63213367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.19020482" y3="-3.41968201" z3="-1.0853411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50943898" y3="0.23032491" z3="-4.70270625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08233331" y3="-1.70667489" z3="0.01512936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89133895" y3="-0.9534373" z3="1.1724854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82557165" y3="-0.30098508" z3="1.48798727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35641552" y3="0.58014391" z3="1.1871657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42202596" y3="1.44750351" z3="-0.45672422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99838848" y3="-0.66695793" z3="1.40486774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36588201" y3="1.80502543" z3="2.60477604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85300106" y3="-0.94300709" z3="2.08480043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60415702" y3="-0.33200269" z3="3.34111528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19359185" y3="0.73875404" z3="-1.27007755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36811141" y3="2.22402127" z3="-0.46828901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39380463" y3="1.94389524" z3="-0.62667333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01164664" y3="-1.02059962" z3="2.44927097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97383339" y3="-0.20571356" z3="1.17575861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88476696" y3="-1.51588247" z3="0.71132553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42716218" y3="1.28889463" z3="3.57937513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56547724" y3="2.4002552" z3="2.5971099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21308288" y3="2.51025538" z3="2.52948225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73496101" y3="-0.79085867" z3="3.83919881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51021431" y3="-0.5058888" z3="3.93693029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43367194" y3="0.75030996" z3="3.22068776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83896392" y3="-0.72684793" z3="0.99723455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40483226" y3="-2.05093144" z3="0.85634953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75337343" y3="-2.69635229" z3="1.90003368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55310842" y3="-2.00478593" z3="3.09133732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04013331" y3="-0.71636294" z3="3.28853604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69163268" y3="-0.08448632" z3="2.23400906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50330698" y3="-2.54668508" z3="-0.11136481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35129105" y3="-3.70270211" z3="1.77519659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69328361" y3="-2.60328141" z3="4.11715789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86406536" y3="-0.20792553" z3="4.23665336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04101209" y3="0.94494817" z3="2.35120962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81081908" y3="0.45563989" z3="-4.2898567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79203667" y3="-0.50916188" z3="-4.47086231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.44306327" y3="-1.70400673" z3="-5.08866962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15379964" y3="-1.93982751" z3="-5.55691172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82052011" y3="-0.9716435" z3="-5.3526923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05741463" y3="1.38172896" z3="-3.76420172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81333374" y3="-0.35900059" z3="-4.11903921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45670996" y3="-2.75131262" z3="-5.23385049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07732282" y3="-2.88268914" z3="-6.05315215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84408215" y3="-1.16174711" z3="-5.67961991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3633725" y3="-1.90715945" z3="5.05701498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31752262" y3="-3.74555514" z3="3.95126449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23428489" y3="-3.65125072" z3="-6.01554067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45905081" y3="-2.66581212" z3="-4.55297704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06183147" y3="1.16005712" z3="-1.47794082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10001254" y3="1.54760417" z3="-2.45587955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42888238" y3="1.49820414" z3="-1.6727937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83604715" y3="2.17063284" z3="-2.79864527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15612173" y3="1.20142121" z3="-0.91066949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89148159" y3="2.420855" z3="-2.94024837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55736978" y3="2.2255943" z3="-3.61998294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88734808" y3="2.52770543" z3="-3.78672341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83517676" y3="2.49737094" z3="-4.3933725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21667311" y3="3.0429159" z3="-4.69347494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38335228" y3="3.138092" z3="-3.30548319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26598416" y3="3.55136654" z3="-4.08927594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18582696" y3="4.14837723" z3="-2.7034427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92801213" y3="5.48176263" z3="-2.9158776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01600842" y3="3.8583802" z3="-2.0574618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56116008" y3="6.23631546" z3="-2.4411612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03424941" y3="4.93782315" z3="-4.30390848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84936068" y3="5.88657186" z3="-3.73758629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18108848" y3="5.23630629" z3="-4.92104386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65966604" y3="6.95019398" z3="-3.9060886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48378154" y3="-2.18676449" z3="-0.28413064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4628303" y3="-2.98469409" z3="-1.04543863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00246379" y3="-2.56242249" z3="0.61223179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10274773" y3="-1.36981852" z3="-0.70114262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19292222" y3="-1.4133225" z3="-1.16656316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32983316" y3="-0.37090883" z3="-1.5117366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11472108" y3="-1.54211089" z3="-0.973663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44588597" y3="-2.06675743" z3="-2.01439946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3358,.0322,-.1851;7.3804,.1603,.427;6.6404,.4319,-.3321;4.7189,1.2218,-2.2507;4.383,.4132,-1.1774;2.7186,.8311,-3.651;3.6208,1.7339,-3.1192;1.3637,2.578,-4.5911;1.5483,1.2357,-4.3593;.4835,2.9138,-5.1479;2.9212,-.4998,-3.4404;3.0951,.0155,-.9981;2.4059,-1.1275,-2.0034;.9336,-1.0105,-1.8255;3.1187,-2.4472,-1.8588;-.1297,-3.595,.653;-.0064,-5.2865,-4.7466;-.2349,-5.0173,-3.7119;-.832,-4.2973,-1.1001;.7923,-4.6179,-2.8591;-1.5537,-5.0833,-3.2583;-1.8531,-4.7173,-1.9484;.5057,-4.2736,-1.5366;1.8274,-4.5559,-3.2021;-2.3541,-5.3915,-3.9337;-2.8918,-4.7351,-1.6095;-1.0196,-3.8386,.2174;-2.1582,-3.6311,.8665;-3.0451,-4.0971,.435;-2.1499,-3.4973,2.3336;-2.2023,-3.3217,5.1323;-3.3438,-3.7075,3.039;-.982,-3.2048,3.0537;-1.0054,-3.1181,4.4428;-3.3696,-3.6212,4.4281;-4.2593,-3.9484,2.4919;-.0251,-3.0649,2.5472;-.0757,-2.9119,4.9813;-4.3066,-3.7955,4.9646;-2.2201,-3.2616,6.224;1.4292,-3.9182,-.6321;2.1902,-3.4197,-1.0853;.5094,.2303,-4.7027;-3.0823,-1.7067,.0151;-2.8913,-.9534,1.1725;-1.8256,-.301,1.488;-.3564,.5801,1.1872;-.422,1.4475,-.4567;.9984,-.667,1.4049;-.3659,1.805,2.6048;-3.853,-.943,2.0848;-3.6042,-.332,3.3411;-.1936,.7388,-1.2701;.3681,2.224,-.4683;-1.3938,1.9439,-.6267;1.0116,-1.0206,2.4493;1.9738,-.2057,1.1758;.8848,-1.5159,.7113;-.4272,1.2889,3.5794;.5655,2.4003,2.5971;-1.2131,2.5103,2.5295;-2.735,-.7909,3.8392;-4.5102,-.5059,3.9369;-3.4337,.7503,3.2207;4.839,-.7268,.9972;4.4048,-2.0509,.8563;3.7534,-2.6964,1.9;3.5531,-2.0048,3.0913;4.0401,-.7164,3.2885;4.6916,-.0845,2.234;4.5033,-2.5467,-.1114;3.3513,-3.7027,1.7752;2.6933,-2.6033,4.1172;3.8641,-.2079,4.2367;5.041,.9449,2.3512;-.8108,.4556,-4.2899;-1.792,-.5092,-4.4709;-1.4431,-1.704,-5.0887;-.1538,-1.9398,-5.5569;.8205,-.9716,-5.3527;-1.0574,1.3817,-3.7642;-2.8133,-.359,-4.119;-2.4567,-2.7513,-5.2339;.0773,-2.8827,-6.0532;1.8441,-1.1617,-5.6796;2.3634,-1.9072,5.057;2.3175,-3.7456,3.9513;-2.2343,-3.6513,-6.0155;-3.4591,-2.6658,-4.553;7.0618,1.1601,-1.4779;6.1,1.5476,-2.4559;8.4289,1.4982,-1.6728;8.836,2.1706,-2.7986;9.1561,1.2014,-.9107;9.8915,2.4209,-2.9402;6.5574,2.2256,-3.62;7.8873,2.5277,-3.7867;5.8352,2.4974,-4.3934;8.2167,3.0429,-4.6935;3.3834,3.1381,-3.3055;2.266,3.5514,-4.0893;4.1858,4.1484,-2.7034;3.928,5.4818,-2.9159;5.016,3.8584,-2.0575;4.5612,6.2363,-2.4412;2.0342,4.9378,-4.3039;2.8494,5.8866,-3.7376;1.1811,5.2363,-4.921;2.6597,6.9502,-3.9061;-4.4838,-2.1868,-.2841;-4.4628,-2.9847,-1.0454;-5.0025,-2.5624,.6122;-5.1027,-1.3698,-.7011;-2.1929,-1.4133,-1.1666;-2.3298,-.3709,-1.5117;-1.1147,-1.5421,-.9737;-2.4459,-2.0668,-2.0144;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650398311400</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002555457783 0.000348868818 0.021780238360 0.005339784844</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030532132 -0.000651938 -0.000024611 0.000137430 0.000249932 0.000388382 0.000396688 0.000492073 0.000610340 0.000796395 0.000919836 0.001100980 0.001273739 0.001292040 0.001372469 0.001390376 0.001700070 0.001778674 0.001835360 0.001956901 0.002162756 0.002511113 0.002563434 0.002719995 0.002847486 0.003137086 0.003240933 0.003449974 0.003848767 0.003986885 0.004344202 0.004725942 0.004827993 0.005089732 0.005910103 0.006073609 0.006282999 0.006578023 0.006798365 0.007581020 0.008019670 0.008146769 0.009167943 0.009496708 0.009920014 0.010711439 0.011043394 0.011593537 0.011705303 0.012176591 0.012860218 0.013177272 0.013980605 0.014375714 0.014934362 0.015351070 0.015587406 0.016038368 0.016051134 0.016866381 0.017344462 0.017921024 0.018909333 0.019403613 0.019804638 0.020763436 0.021208923 0.021357064 0.022389440 0.023115654 0.025093994 0.025910856 0.026649187 0.026860481 0.027388416 0.029108514 0.029367926 0.031426166 0.033236356 0.033467265 0.033843404 0.035800046 0.036820739 0.037396919 0.039356490 0.039914285 0.040743085 0.041989438 0.042760793 0.044388959 0.045294542 0.046683366 0.047583222 0.049175511 0.050278875 0.050793828 0.051023598 0.051216322 0.052473324 0.052521538 0.052846782 0.052942125 0.054468782 0.054678839 0.055450338 0.056169052 0.056485859 0.056499041 0.056990233 0.058380216 0.060274679 0.060641701 0.061482098 0.062059944 0.063054143 0.064361885 0.065070679 0.065763975 0.066286834 0.067766392 0.068876799 0.070156375 0.072657929 0.074328200 0.074469028 0.076130903 0.077770122 0.083517954 0.085127866 0.086836826 0.087207086 0.087920014 0.090324746 0.090788587 0.092961397 0.094578917 0.095197835 0.096311629 0.097266645 0.097806958 0.098781562 0.099585486 0.100201854 0.102320740 0.102718073 0.103162609 0.103411406 0.103935298 0.105525202 0.106733280 0.107325491 0.109183630 0.110296945 0.110638445 0.112326511 0.112584247 0.113812162 0.114834754 0.116243502 0.118883273 0.120581195 0.121498419 0.122421827 0.124251626 0.125392088 0.126223277 0.126896685 0.131710434 0.134874913 0.135579003 0.142602230 0.143509096 0.146864174 0.147170050 0.149605995 0.152009084 0.154612096 0.155882246 0.156611861 0.161272788 0.161731289 0.173306776 0.173809312 0.179362691 0.183921826 0.185049163 0.188959202 0.189973816 0.193889618 0.193929693 0.198301718 0.200066653 0.205077596 0.206845064 0.207129563 0.209750377 0.211591693 0.215602030 0.217422476 0.217676073 0.220524242 0.224935651 0.226205967 0.231876691 0.234859046 0.235376789 0.235769774 0.244500859 0.255728286 0.257119748 0.263047103 0.269678916 0.280282182 0.282872721 0.286158941 0.291453019 0.296253384 0.304188601 0.305602439 0.307212291 0.313868284 0.316432374 0.317266932 0.321908786 0.329327758 0.332411183 0.351575351 0.351897565 0.354748007 0.355657584 0.359857215 0.362701285 0.363330587 0.384104255 0.385975371 0.391613660 0.410430563 0.425275400 0.429941469 0.458104125 0.468571360 0.477345708 0.482479051 0.483509332 0.487108686 0.490358570 0.508873562 0.514981264 0.535010136 0.566045000 0.572709442 0.592011083 0.593475902 0.606259059 0.607694152 0.644491608 0.646453182 0.648713580 0.674206772 0.677494934 0.684920616 0.691479409 0.693261877 0.699398208 0.704308217 0.717004676 0.741177036 0.751188131 0.758500103 0.767410603 0.772399980 0.778750034 0.810477170 0.812729084 0.818306511 0.821603694 0.822744096 0.831421084 0.832249299 0.835719070 0.838363522 0.845205012 0.846279804 0.848209672 0.858567639 0.864727452 0.865806140 0.873228338 0.881182919 0.884333774 0.889291931 0.892041123 0.900583514 0.903838737 0.920817357 0.923352878 0.933171564 0.935124096 0.965098620 0.975654953 0.985644159 1.000930422 1.017528650 1.027352232 1.041320747 1.050276589 1.057288062 1.068158900 1.086535216 1.088482311 1.103503212 1.106211665 1.112237574 1.119683868 1.123707968 1.135472198 1.143109653 1.174053650 1.175578039 1.180904688 1.186250607 1.190101578 1.195998313 1.223898048 1.227823161 1.274205611 1.300979447 1.318946756 1.328027993 1.332621181 1.334886806 1.335732272 1.341266059 1.342815922 1.344887048 1.358814399 1.378354257 1.382905705 1.384085893 1.414158800 1.419586674 1.435226761 1.551441060 1.679020130 1.774979731</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">185</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33993518" y3="0.03395135" z3="-0.18725067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38587516" y3="0.15809218" z3="0.42108971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64503868" y3="0.43042584" z3="-0.336947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72181442" y3="1.2227163" z3="-2.25296582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38611295" y3="0.41565838" z3="-1.1783928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71968805" y3="0.83368006" z3="-3.65084989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62342103" y3="1.73586837" z3="-3.12047991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36582857" y3="2.58092314" z3="-4.59085058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54923718" y3="1.23865635" z3="-4.35876942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48508679" y3="2.91753878" z3="-5.1465667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9207477" y3="-0.49736282" z3="-3.43909918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09771497" y3="0.01959382" z3="-0.99687639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40555716" y3="-1.12297125" z3="-2.00094069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9336525" y3="-1.00326359" z3="-1.82168447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11638058" y3="-2.44384428" z3="-1.85651143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13102539" y3="-3.59967302" z3="0.65543687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00421169" y3="-5.28101948" z3="-4.74744449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23369799" y3="-5.01372007" z3="-3.71232914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83250721" y3="-4.29972851" z3="-1.09908523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79265824" y3="-4.61316691" z3="-2.85891051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55241083" y3="-5.08384104" z3="-3.258618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85282648" y3="-4.72058663" z3="-1.94810406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50527199" y3="-4.27178621" z3="-1.53581017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82822554" y3="-4.54893392" z3="-3.20205012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35337396" y3="-5.39172418" z3="-3.9346319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89125979" y3="-4.74246389" z3="-1.6092643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02049986" y3="-3.84367168" z3="0.21928041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.15962626" y3="-3.6359906" z3="0.8675886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04628594" y3="-4.10232169" z3="0.43550395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15245734" y3="-3.50135187" z3="2.33450715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20676057" y3="-3.32259633" z3="5.13269688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34672385" y3="-3.71258138" z3="3.03938557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98527655" y3="-3.20564103" z3="3.05470262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00996524" y3="-3.11699731" z3="4.4435047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3728278" y3="-3.62555976" z3="4.42846396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26158887" y3="-3.95567781" z3="2.49213705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02669881" y3="-3.06674079" z3="2.54816076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08135643" y3="-2.90755734" z3="4.98189784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30888521" y3="-3.80257597" z3="4.96467027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22477541" y3="-3.26199567" z3="6.22444815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42867908" y3="-3.91613869" z3="-0.6307074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18913297" y3="-3.41606392" z3="-1.0835459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50979868" y3="0.23430517" z3="-4.7004835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08107509" y3="-1.71186584" z3="0.01519019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89411589" y3="-0.96001923" z3="1.17391495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82848625" y3="-0.30976764" z3="1.49418932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36354066" y3="0.57857054" z3="1.19609942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43084754" y3="1.44948175" z3="-0.44626206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99621262" y3="-0.66349555" z3="1.40969724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37904144" y3="1.7987903" z3="2.61753814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.859202" y3="-0.94960154" z3="2.082238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61631511" y3="-0.33762338" z3="3.3387145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19585731" y3="0.74317085" z3="-1.26151708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34633118" y3="2.23463677" z3="-0.45266316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40736857" y3="1.93687468" z3="-0.61730368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01294382" y3="-1.0184548" z3="2.45375181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96999661" y3="-0.19931018" z3="1.1786404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88279862" y3="-1.51237824" z3="0.71566375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43824026" y3="1.27898604" z3="3.58992952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54976516" y3="2.3978052" z3="2.61265079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22905412" y3="2.50007885" z3="2.54501085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74997399" y3="-0.79634032" z3="3.84130258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52516974" y3="-0.51079591" z3="3.92993114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44474392" y3="0.74470217" z3="3.21814214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84288596" y3="-0.7232042" z3="0.99615152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40618144" y3="-2.04671239" z3="0.85603642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75340633" y3="-2.69023036" z3="1.89996477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55414544" y3="-1.9973514" z3="3.09036993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04429922" y3="-0.70965186" z3="3.28724985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69681279" y3="-0.07961794" z3="2.23226635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50430637" y3="-2.54351805" z3="-0.11067805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3496324" y3="-3.69596498" z3="1.77598648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69434374" y3="-2.59370935" z3="4.11755919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87068533" y3="-0.20052461" z3="4.23618966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04823825" y3="0.94933522" z3="2.34879869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80930901" y3="0.45867545" z3="-4.28415119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.79058051" y3="-0.50731433" z3="-4.46865276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4414642" y3="-1.70088023" z3="-5.08970482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15271106" y3="-1.93564465" z3="-5.55794822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82098109" y3="-0.96654854" z3="-5.35411357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05558234" y3="1.38358419" z3="-3.75641994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81105042" y3="-0.35782899" z3="-4.11563973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4543551" y3="-2.74794702" z3="-5.23276059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07834795" y3="-2.87764932" z3="-6.0552928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84400647" y3="-1.15554369" z3="-5.68292324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36779027" y3="-1.89697113" z3="5.05936586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31776049" y3="-3.73508886" z3="3.95337328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23166381" y3="-3.64760797" z3="-6.01385683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45683403" y3="-2.66407015" z3="-4.55060493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06601205" y3="1.15601261" z3="-1.48450675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1032388" y3="1.54480553" z3="-2.46104236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43354386" y3="1.49065393" z3="-1.68243722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84040139" y3="2.16189125" z3="-2.80968457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16143138" y3="1.19253443" z3="-0.92152317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89584388" y3="2.40754027" z3="-2.95416144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56003681" y3="2.22049318" z3="-3.62686885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89076103" y3="2.52031005" z3="-3.79633435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83705384" y3="2.49307517" z3="-4.39922993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21969787" y3="3.03326691" z3="-4.70450407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38800945" y3="3.14010672" z3="-3.30808303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26979156" y3="3.55419004" z3="-4.09026127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19354663" y3="4.14955584" z3="-2.70908844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93741413" y3="5.48319761" z3="-2.92253845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02415431" y3="3.85924697" z3="-2.0638732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57178073" y3="6.23828968" z3="-2.44857859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0395824" y3="4.94110694" z3="-4.3055314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85797318" y3="5.88854013" z3="-3.74288738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18620584" y3="5.23993442" z3="-4.92209842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66964324" y3="6.95243545" z3="-3.91220587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48173568" y3="-2.1914617" z3="-0.28942442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45967676" y3="-2.98738549" z3="-1.05364792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00193323" y3="-2.57003538" z3="0.60511459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10096516" y3="-1.37382522" z3="-0.70503786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18797768" y3="-1.41624242" z3="-1.16309366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32840816" y3="-0.37649445" z3="-1.50933262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10955544" y3="-1.54266221" z3="-0.96798584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43931203" y3="-2.06973526" z3="-2.01292161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3399,.034,-.1873;7.3859,.1581,.4211;6.645,.4304,-.3369;4.7218,1.2227,-2.253;4.3861,.4157,-1.1784;2.7197,.8337,-3.6508;3.6234,1.7359,-3.1205;1.3658,2.5809,-4.5909;1.5492,1.2387,-4.3588;.4851,2.9175,-5.1466;2.9207,-.4974,-3.4391;3.0977,.0196,-.9969;2.4056,-1.123,-2.0009;.9337,-1.0033,-1.8217;3.1164,-2.4438,-1.8565;-.131,-3.5997,.6554;-.0042,-5.281,-4.7474;-.2337,-5.0137,-3.7123;-.8325,-4.2997,-1.0991;.7927,-4.6132,-2.8589;-1.5524,-5.0838,-3.2586;-1.8528,-4.7206,-1.9481;.5053,-4.2718,-1.5358;1.8282,-4.5489,-3.2021;-2.3534,-5.3917,-3.9346;-2.8913,-4.7425,-1.6093;-1.0205,-3.8437,.2193;-2.1596,-3.636,.8676;-3.0463,-4.1023,.4355;-2.1525,-3.5014,2.3345;-2.2068,-3.3226,5.1327;-3.3467,-3.7126,3.0394;-.9853,-3.2056,3.0547;-1.01,-3.117,4.4435;-3.3728,-3.6256,4.4285;-4.2616,-3.9557,2.4921;-.0267,-3.0667,2.5482;-.0814,-2.9076,4.9819;-4.3089,-3.8026,4.9647;-2.2248,-3.262,6.2244;1.4287,-3.9161,-.6307;2.1891,-3.4161,-1.0835;.5098,.2343,-4.7005;-3.0811,-1.7119,.0152;-2.8941,-.96,1.1739;-1.8285,-.3098,1.4942;-.3635,.5786,1.1961;-.4308,1.4495,-.4463;.9962,-.6635,1.4097;-.379,1.7988,2.6175;-3.8592,-.9496,2.0822;-3.6163,-.3376,3.3387;-.1959,.7432,-1.2615;.3463,2.2346,-.4527;-1.4074,1.9369,-.6173;1.0129,-1.0185,2.4538;1.97,-.1993,1.1786;.8828,-1.5124,.7157;-.4382,1.279,3.5899;.5498,2.3978,2.6127;-1.2291,2.5001,2.545;-2.75,-.7963,3.8413;-4.5252,-.5108,3.9299;-3.4447,.7447,3.2181;4.8429,-.7232,.9962;4.4062,-2.0467,.856;3.7534,-2.6902,1.9;3.5541,-1.9974,3.0904;4.0443,-.7097,3.2872;4.6968,-.0796,2.2323;4.5043,-2.5435,-.1107;3.3496,-3.696,1.776;2.6943,-2.5937,4.1176;3.8707,-.2005,4.2362;5.0482,.9493,2.3488;-.8093,.4587,-4.2842;-1.7906,-.5073,-4.4687;-1.4415,-1.7009,-5.0897;-.1527,-1.9356,-5.5579;.821,-.9665,-5.3541;-1.0556,1.3836,-3.7564;-2.8111,-.3578,-4.1156;-2.4544,-2.7479,-5.2328;.0783,-2.8776,-6.0553;1.844,-1.1555,-5.6829;2.3678,-1.897,5.0594;2.3178,-3.7351,3.9534;-2.2317,-3.6476,-6.0139;-3.4568,-2.6641,-4.5506;7.066,1.156,-1.4845;6.1032,1.5448,-2.461;8.4335,1.4907,-1.6824;8.8404,2.1619,-2.8097;9.1614,1.1925,-.9215;9.8958,2.4075,-2.9542;6.56,2.2205,-3.6269;7.8908,2.5203,-3.7963;5.8371,2.4931,-4.3992;8.2197,3.0333,-4.7045;3.388,3.1401,-3.3081;2.2698,3.5542,-4.0903;4.1935,4.1496,-2.7091;3.9374,5.4832,-2.9225;5.0242,3.8592,-2.0639;4.5718,6.2383,-2.4486;2.0396,4.9411,-4.3055;2.858,5.8885,-3.7429;1.1862,5.2399,-4.9221;2.6696,6.9524,-3.9122;-4.4817,-2.1915,-.2894;-4.4597,-2.9874,-1.0536;-5.0019,-2.57,.6051;-5.101,-1.3738,-.705;-2.188,-1.4162,-1.1631;-2.3284,-.3765,-1.5093;-1.1096,-1.5427,-.968;-2.4393,-2.0697,-2.0129;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650406563671</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002161737893 0.000319904424 0.018149758357 0.005334847803</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030532821 -0.000490522 -0.000009422 0.000132301 0.000246818 0.000386401 0.000405992 0.000492118 0.000610449 0.000797248 0.000920728 0.001101458 0.001275340 0.001291903 0.001374142 0.001396220 0.001691972 0.001779264 0.001828647 0.001957098 0.002163748 0.002511023 0.002563761 0.002722218 0.002846665 0.003136656 0.003233268 0.003448550 0.003852703 0.003979443 0.004354163 0.004739110 0.004826703 0.005078571 0.005912575 0.006068130 0.006274422 0.006571258 0.006798749 0.007585048 0.008022287 0.008154629 0.009169510 0.009496677 0.009917878 0.010711007 0.011042546 0.011595168 0.011656509 0.012127835 0.012859698 0.013157659 0.013982090 0.014374626 0.014942591 0.015351212 0.015591669 0.016038221 0.016064247 0.016866398 0.017348435 0.017922950 0.018938096 0.019404464 0.019810026 0.020771156 0.021208745 0.021356123 0.022393022 0.023116142 0.025092946 0.025914199 0.026648845 0.026864881 0.027389047 0.029109523 0.029372994 0.031426520 0.033231225 0.033467666 0.033845069 0.035796466 0.036824181 0.037400312 0.039357122 0.039917309 0.040743028 0.041998605 0.042775679 0.044390884 0.045296334 0.046690272 0.047583236 0.049176190 0.050277866 0.050794143 0.051021404 0.051215728 0.052473528 0.052524877 0.052847798 0.052943498 0.054466842 0.054680057 0.055453748 0.056171750 0.056486795 0.056499100 0.056992500 0.058381185 0.060274739 0.060642401 0.061513755 0.062061629 0.063055364 0.064362640 0.065076579 0.065764661 0.066291569 0.067766220 0.068883112 0.070164291 0.072660735 0.074329512 0.074470138 0.076130448 0.077775002 0.083533312 0.085134410 0.086842529 0.087210187 0.087922145 0.090329764 0.090800523 0.092965158 0.094579227 0.095198086 0.096311641 0.097267036 0.097823764 0.098787891 0.099585492 0.100204104 0.102321722 0.102723069 0.103178144 0.103424293 0.103935576 0.105594703 0.106745849 0.107332254 0.109269092 0.110430676 0.110821806 0.112341118 0.112580965 0.113862690 0.114833932 0.116252701 0.118890289 0.120581493 0.121557510 0.122421441 0.124248854 0.125400872 0.126226163 0.126900959 0.131727606 0.134876548 0.135581112 0.142601831 0.143508201 0.146869674 0.147176778 0.149606094 0.152019067 0.154627495 0.155891955 0.156613068 0.161287900 0.161731262 0.173308145 0.173828134 0.179361494 0.183925403 0.185050885 0.188977267 0.189975462 0.193891114 0.193931102 0.198301824 0.200093565 0.205094466 0.206845192 0.207133615 0.209752419 0.211624730 0.215618130 0.217449298 0.217683442 0.220525866 0.224935583 0.226208641 0.231878874 0.234859474 0.235379751 0.235772595 0.244502555 0.255730650 0.257125779 0.263083446 0.269687515 0.280283429 0.282872851 0.286160754 0.291459937 0.296283325 0.304190804 0.305605116 0.307211216 0.313894089 0.316432335 0.317269851 0.321914457 0.329332496 0.332414650 0.351592667 0.351910593 0.354752961 0.355661891 0.359865550 0.362701062 0.363339067 0.384104986 0.385984891 0.391614359 0.410431957 0.425276937 0.429948790 0.458110277 0.468572822 0.477367786 0.482516558 0.483518392 0.487112058 0.490350431 0.508898845 0.515011512 0.535026418 0.566042837 0.572710134 0.592018566 0.593480554 0.606263525 0.607713151 0.644485624 0.646460906 0.648719057 0.674206215 0.677545184 0.684920576 0.691487121 0.693300328 0.699400217 0.704316609 0.717052900 0.741177202 0.751194754 0.758546944 0.767433184 0.772412163 0.778751333 0.810484503 0.812731426 0.818459998 0.821605897 0.822801457 0.831422205 0.832343182 0.835736883 0.838810548 0.845228042 0.846321425 0.848237528 0.858568506 0.864794303 0.865811357 0.873227629 0.881190301 0.884339540 0.889298059 0.892045563 0.900584446 0.903840199 0.920916305 0.923353981 0.933177349 0.935123957 0.965133927 0.975661800 0.985645943 1.000930256 1.017550096 1.027353929 1.041333156 1.050279138 1.057291418 1.068173251 1.086536100 1.088482514 1.103503724 1.106217792 1.112247082 1.119735131 1.123769145 1.135473330 1.143109947 1.174074256 1.175607830 1.180922735 1.186254602 1.190138231 1.196001059 1.223914467 1.227821089 1.274221263 1.300982302 1.318946817 1.328027182 1.332624641 1.334925002 1.335745417 1.341371096 1.342827003 1.344891393 1.358816802 1.378385133 1.382903250 1.384099928 1.414307747 1.419585712 1.435225356 1.551441502 1.679232934 1.775062350</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">186</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34279015" y3="0.03644442" z3="-0.18974172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38964251" y3="0.15694613" z3="0.41632145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64855237" y3="0.43038984" z3="-0.3410224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72499352" y3="1.22469041" z3="-2.25585989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38881006" y3="0.41958309" z3="-1.18008204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72157258" y3="0.83692643" z3="-3.6517459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62692767" y3="1.73831025" z3="-3.12345791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36927628" y3="2.58453439" z3="-4.59349547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55153385" y3="1.24250063" z3="-4.35976044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48879274" y3="2.92127507" z3="-5.14948201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9203773" y3="-0.4938826" z3="-3.43764335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09994837" y3="0.02680307" z3="-0.99672038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40460538" y3="-1.11567851" z3="-1.99827484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93310873" y3="-0.9925006" z3="-1.81841684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11289446" y3="-2.43778317" z3="-1.8524026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13416222" y3="-3.6046309" z3="0.65885808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00623214" y3="-5.27001376" z3="-4.74864918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23524486" y3="-5.00723693" z3="-3.71237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83389014" y3="-4.30335297" z3="-1.09673135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79072959" y3="-4.60548853" z3="-2.85870134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55298736" y3="-5.08421769" z3="-3.25771142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85300419" y3="-4.72676221" z3="-1.94568167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50315269" y3="-4.26852876" z3="-1.53449271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82518549" y3="-4.53561063" z3="-3.20273202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35272359" y3="-5.39374211" z3="-3.93394075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89085059" y3="-4.75419083" z3="-1.60547469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02309708" y3="-3.84932384" z3="0.22216246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16278542" y3="-3.64081369" z3="0.86935068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.04932372" y3="-4.1070905" z3="0.43719364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15594144" y3="-3.50573287" z3="2.33635594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21132075" y3="-3.3248795" z3="5.13452801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34984166" y3="-3.71815635" z3="3.04107569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98933364" y3="-3.2083599" z3="3.05678774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01440674" y3="-3.11887901" z3="4.44565505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3769049" y3="-3.62964784" z3="4.4300179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26413163" y3="-3.96282953" z3="2.49364083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03217408" y3="-3.06639265" z3="2.55098088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08584287" y3="-2.90842921" z3="4.98415679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31355325" y3="-3.8063571" z3="4.96618164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23031631" y3="-3.26266421" z3="6.2261251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4241356" y3="-3.90962991" z3="-0.62936984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18489202" y3="-3.40878598" z3="-1.08171615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5120637" y3="0.23751146" z3="-4.70176931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08229844" y3="-1.71697858" z3="0.01538399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89846593" y3="-0.96580595" z3="1.17539372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83331217" y3="-0.31703932" z3="1.50018957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36877276" y3="0.5741468" z3="1.20522977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44099206" y3="1.4511601" z3="-0.43330542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99418185" y3="-0.66590605" z3="1.41251306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38530324" y3="1.78811651" z3="2.63215019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86679594" y3="-0.95547653" z3="2.08051116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62791742" y3="-0.34351686" z3="3.33827794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19843634" y3="0.75043845" z3="-1.24974998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33535156" y3="2.24075573" z3="-0.43672607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41995404" y3="1.93250755" z3="-0.60449595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01492208" y3="-1.02154603" z3="2.45619214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96619982" y3="-0.19900426" z3="1.17921532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88169454" y3="-1.51435479" z3="0.71834495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44562292" y3="1.26369984" z3="3.60244104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54310194" y3="2.38785059" z3="2.63080055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23568219" y3="2.48988497" z3="2.56164357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76254616" y3="-0.80181631" z3="3.84360008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5386217" y3="-0.51696277" z3="3.92696253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45694017" y3="0.73866442" z3="3.21813736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84539811" y3="-0.71930575" z3="0.99449659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40868875" y3="-2.042797" z3="0.85611339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75584042" y3="-2.68497308" z3="1.9008778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55673187" y3="-1.99085483" z3="3.09068855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04675224" y3="-0.70311992" z3="3.28573256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69960653" y3="-0.07446384" z3="2.2301146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50635446" y3="-2.54060372" z3="-0.1102946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35181251" y3="-3.6906155" z3="1.77801514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69480308" y3="-2.58527111" z3="4.11718826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8722219" y3="-0.19268366" z3="4.23325234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05144804" y3="0.95444002" z3="2.34570571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80704639" y3="0.46009038" z3="-4.28419719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78752934" y3="-0.50560266" z3="-4.46512892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43888175" y3="-1.6983605" z3="-5.0879174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15071" y3="-1.93146853" z3="-5.56031806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82289166" y3="-0.96231815" z3="-5.3554454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05323488" y3="1.38428004" z3="-3.75462324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80788154" y3="-0.35773514" z3="-4.10974881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45169901" y3="-2.74648058" z3="-5.23311552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08014304" y3="-2.87254851" z3="-6.0598014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84586965" y3="-1.15002078" z3="-5.6858779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36735409" y3="-1.88720423" z3="5.05669742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31548245" y3="-3.72636643" z3="3.95266235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22852711" y3="-3.64563107" z3="-6.01567814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45414117" y3="-2.66231491" z3="-4.55221023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06983144" y3="1.15466774" z3="-1.48947236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10690364" y3="1.54442619" z3="-2.46542476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43776252" y3="1.48627579" z3="-1.68919732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84460769" y3="2.15442055" z3="-2.81778453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16593186" y3="1.18772961" z3="-0.92868801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90071885" y3="2.39949997" z3="-2.96317198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56386165" y3="2.21789134" z3="-3.63241822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89467379" y3="2.51368673" z3="-3.80384102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84066655" y3="2.4910793" z3="-4.40435176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22364643" y3="3.02543632" z3="-4.7128044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39314169" y3="3.14270664" z3="-3.313025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27498311" y3="3.55698435" z3="-4.09517875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.200592" y3="4.15226181" z3="-2.7163616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94683678" y3="5.48572297" z3="-2.93259919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03184293" y3="3.86146304" z3="-2.0720923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58435134" y3="6.23946342" z3="-2.46281824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04671599" y3="4.94377603" z3="-4.31268284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86685087" y3="5.89153126" z3="-3.75205595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19265796" y3="5.24323322" z3="-4.92811294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68008044" y3="6.95536441" z3="-3.92328922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48216545" y3="-2.19662867" z3="-0.29296599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45681642" y3="-2.99072574" z3="-1.05826922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00461536" y3="-2.57716559" z3="0.59946684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09999128" y3="-1.37814341" z3="-0.70866409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18587185" y3="-1.42109862" z3="-1.16069249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32269551" y3="-0.37870442" z3="-1.50585179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10838516" y3="-1.54732936" z3="-0.96105548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43090756" y3="-2.07436933" z3="-2.01047973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.0364,-.1897;7.3896,.1569,.4163;6.6486,.4304,-.341;4.725,1.2247,-2.2559;4.3888,.4196,-1.1801;2.7216,.8369,-3.6517;3.6269,1.7383,-3.1235;1.3693,2.5845,-4.5935;1.5515,1.2425,-4.3598;.4888,2.9213,-5.1495;2.9204,-.4939,-3.4376;3.0999,.0268,-.9967;2.4046,-1.1157,-1.9983;.9331,-.9925,-1.8184;3.1129,-2.4378,-1.8524;-.1342,-3.6046,.6589;-.0062,-5.27,-4.7486;-.2352,-5.0072,-3.7124;-.8339,-4.3034,-1.0967;.7907,-4.6055,-2.8587;-1.553,-5.0842,-3.2577;-1.853,-4.7268,-1.9457;.5032,-4.2685,-1.5345;1.8252,-4.5356,-3.2027;-2.3527,-5.3937,-3.9339;-2.8909,-4.7542,-1.6055;-1.0231,-3.8493,.2222;-2.1628,-3.6408,.8694;-3.0493,-4.1071,.4372;-2.1559,-3.5057,2.3364;-2.2113,-3.3249,5.1345;-3.3498,-3.7182,3.0411;-.9893,-3.2084,3.0568;-1.0144,-3.1189,4.4457;-3.3769,-3.6296,4.43;-4.2641,-3.9628,2.4936;-.0322,-3.0664,2.551;-.0858,-2.9084,4.9842;-4.3136,-3.8064,4.9662;-2.2303,-3.2627,6.2261;1.4241,-3.9096,-.6294;2.1849,-3.4088,-1.0817;.5121,.2375,-4.7018;-3.0823,-1.717,.0154;-2.8985,-.9658,1.1754;-1.8333,-.317,1.5002;-.3688,.5741,1.2052;-.441,1.4512,-.4333;.9942,-.6659,1.4125;-.3853,1.7881,2.6322;-3.8668,-.9555,2.0805;-3.6279,-.3435,3.3383;-.1984,.7504,-1.2497;.3354,2.2408,-.4367;-1.42,1.9325,-.6045;1.0149,-1.0215,2.4562;1.9662,-.199,1.1792;.8817,-1.5144,.7183;-.4456,1.2637,3.6024;.5431,2.3879,2.6308;-1.2357,2.4899,2.5616;-2.7625,-.8018,3.8436;-4.5386,-.517,3.927;-3.4569,.7387,3.2181;4.8454,-.7193,.9945;4.4087,-2.0428,.8561;3.7558,-2.685,1.9009;3.5567,-1.9909,3.0907;4.0468,-.7031,3.2857;4.6996,-.0745,2.2301;4.5064,-2.5406,-.1103;3.3518,-3.6906,1.778;2.6948,-2.5853,4.1172;3.8722,-.1927,4.2333;5.0514,.9544,2.3457;-.807,.4601,-4.2842;-1.7875,-.5056,-4.4651;-1.4389,-1.6984,-5.0879;-.1507,-1.9315,-5.5603;.8229,-.9623,-5.3554;-1.0532,1.3843,-3.7546;-2.8079,-.3577,-4.1097;-2.4517,-2.7465,-5.2331;.0801,-2.8725,-6.0598;1.8459,-1.15,-5.6859;2.3674,-1.8872,5.0567;2.3155,-3.7264,3.9527;-2.2285,-3.6456,-6.0157;-3.4541,-2.6623,-4.5522;7.0698,1.1547,-1.4895;6.1069,1.5444,-2.4654;8.4378,1.4863,-1.6892;8.8446,2.1544,-2.8178;9.1659,1.1877,-.9287;9.9007,2.3995,-2.9632;6.5639,2.2179,-3.6324;7.8947,2.5137,-3.8038;5.8407,2.4911,-4.4044;8.2236,3.0254,-4.7128;3.3931,3.1427,-3.313;2.275,3.557,-4.0952;4.2006,4.1523,-2.7164;3.9468,5.4857,-2.9326;5.0318,3.8615,-2.0721;4.5844,6.2395,-2.4628;2.0467,4.9438,-4.3127;2.8669,5.8915,-3.7521;1.1927,5.2432,-4.9281;2.6801,6.9554,-3.9233;-4.4822,-2.1966,-.293;-4.4568,-2.9907,-1.0583;-5.0046,-2.5772,.5995;-5.1,-1.3781,-.7087;-2.1859,-1.4211,-1.1607;-2.3227,-.3787,-1.5059;-1.1084,-1.5473,-.9611;-2.4309,-2.0744,-2.0105;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650413276369</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001880258902 0.000293617253 0.024474713767 0.005338535112</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030538931 -0.000888307 0.000094172 0.000130677 0.000246845 0.000385186 0.000405841 0.000492014 0.000610438 0.000800708 0.000923649 0.001102142 0.001275425 0.001292003 0.001374881 0.001395861 0.001691598 0.001779058 0.001827332 0.001957287 0.002165115 0.002512267 0.002568031 0.002722960 0.002847691 0.003137335 0.003232560 0.003449269 0.003857739 0.003975825 0.004355755 0.004750299 0.004825810 0.005078190 0.005912912 0.006070694 0.006272556 0.006571525 0.006798847 0.007586801 0.008024626 0.008159579 0.009170490 0.009498639 0.009917804 0.010715907 0.011044320 0.011593830 0.011655148 0.012124424 0.012859880 0.013157864 0.013984880 0.014374988 0.014951416 0.015352376 0.015593547 0.016038670 0.016071951 0.016866104 0.017361619 0.017920458 0.018972335 0.019405276 0.019819948 0.020778663 0.021209476 0.021358121 0.022393897 0.023116168 0.025095723 0.025915161 0.026648527 0.026866108 0.027389238 0.029112491 0.029376484 0.031426751 0.033229481 0.033468174 0.033845829 0.035796790 0.036824236 0.037400859 0.039359696 0.039924480 0.040742966 0.042003186 0.042775867 0.044389147 0.045305409 0.046693862 0.047583976 0.049176137 0.050279301 0.050794124 0.051021469 0.051215455 0.052473577 0.052525649 0.052848562 0.052943881 0.054468142 0.054679904 0.055454364 0.056172075 0.056487072 0.056499433 0.056993352 0.058381703 0.060275343 0.060646579 0.061544121 0.062061164 0.063057394 0.064361978 0.065085716 0.065765299 0.066297872 0.067766359 0.068884480 0.070168872 0.072661650 0.074330691 0.074471042 0.076130498 0.077781617 0.083539938 0.085140053 0.086843689 0.087211727 0.087927469 0.090333550 0.090805691 0.092967036 0.094579911 0.095198753 0.096311672 0.097267598 0.097832346 0.098793871 0.099585406 0.100204987 0.102322700 0.102728635 0.103189764 0.103430280 0.103936027 0.105612178 0.106758875 0.107338144 0.109325460 0.110478907 0.110997671 0.112360811 0.112583475 0.113889415 0.114842681 0.116254475 0.118903901 0.120581580 0.121601555 0.122428445 0.124251947 0.125406064 0.126230276 0.126908934 0.131733429 0.134877615 0.135582144 0.142609974 0.143510006 0.146873852 0.147179640 0.149606570 0.152026050 0.154633133 0.155895153 0.156614263 0.161292927 0.161731017 0.173308452 0.173844783 0.179361105 0.183929401 0.185056873 0.188989559 0.189975567 0.193891646 0.193931579 0.198301848 0.200100081 0.205097859 0.206845351 0.207138483 0.209753797 0.211697557 0.215638737 0.217469841 0.217699650 0.220527551 0.224936166 0.226209812 0.231879239 0.234859956 0.235381673 0.235772893 0.244504174 0.255735018 0.257127653 0.263110379 0.269692011 0.280284407 0.282873391 0.286161246 0.291463759 0.296311973 0.304193208 0.305605916 0.307212209 0.313906875 0.316432322 0.317271532 0.321917367 0.329344219 0.332419715 0.351601365 0.351922264 0.354753934 0.355666023 0.359875954 0.362701101 0.363355341 0.384104523 0.385987477 0.391615698 0.410435691 0.425280504 0.429956161 0.458114051 0.468574907 0.477372087 0.482527435 0.483523986 0.487120277 0.490350816 0.508919078 0.515037331 0.535037172 0.566043315 0.572713333 0.592020020 0.593487947 0.606265256 0.607720300 0.644485386 0.646463184 0.648721659 0.674206667 0.677567228 0.684920326 0.691491390 0.693312252 0.699403042 0.704323937 0.717087425 0.741177281 0.751200480 0.758575306 0.767452391 0.772424434 0.778751673 0.810490118 0.812734989 0.818517147 0.821606838 0.822831004 0.831422088 0.832395662 0.835746255 0.839049759 0.845241409 0.846370890 0.848253185 0.858574221 0.864840599 0.865814192 0.873230102 0.881209756 0.884341485 0.889302185 0.892064894 0.900585457 0.903841624 0.921045534 0.923354167 0.933206003 0.935124043 0.965145064 0.975667186 0.985648012 1.000931134 1.017581934 1.027360978 1.041343026 1.050279508 1.057292183 1.068183137 1.086536406 1.088484367 1.103509263 1.106219086 1.112254785 1.119818524 1.123820091 1.135474563 1.143109830 1.174085496 1.175618395 1.180932122 1.186258448 1.190145512 1.196001412 1.223932728 1.227823741 1.274225967 1.300991105 1.318946896 1.328028670 1.332625578 1.334938830 1.335752221 1.341412063 1.342830548 1.344892540 1.358817434 1.378404017 1.382904545 1.384103973 1.414404695 1.419589613 1.435225150 1.551442068 1.679359219 1.775137959</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">187</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34132603" y3="0.04224444" z3="-0.18840306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38749848" y3="0.16123236" z3="0.41938116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64748865" y3="0.43416583" z3="-0.33919634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72671653" y3="1.22729351" z3="-2.25735188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38849839" y3="0.42467455" z3="-1.18017315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72394415" y3="0.83915747" z3="-3.65451826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63019467" y3="1.74067622" z3="-3.12718671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37548463" y3="2.58670446" z3="-4.60196596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55503952" y3="1.24490991" z3="-4.3644388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4957413" y3="2.92369566" z3="-5.15904658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92070982" y3="-0.49169055" z3="-3.43770355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09888243" y3="0.0330881" z3="-0.99707914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40285591" y3="-1.11020419" z3="-1.99749042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93137846" y3="-0.98497611" z3="-1.81885618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10970971" y3="-2.43282246" z3="-1.84909968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13545635" y3="-3.60843254" z3="0.66062217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00747073" y3="-5.26225887" z3="-4.75058869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23663531" y3="-5.00170773" z3="-3.7137022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83585462" y3="-4.30321316" z3="-1.09642264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78853511" y3="-4.59897097" z3="-2.86012017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55432649" y3="-5.08170982" z3="-3.25828721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85498581" y3="-4.72643332" z3="-1.94559609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50117918" y3="-4.2655239" z3="-1.53495872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82268307" y3="-4.52615016" z3="-3.2046662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35406121" y3="-5.39153965" z3="-3.9345785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89303556" y3="-4.7556872" z3="-1.60493477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02455314" y3="-3.85245616" z3="0.22363206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16426602" y3="-3.64497774" z3="0.87126664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05065328" y3="-4.11145542" z3="0.4387617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1571426" y3="-3.51195172" z3="2.33844563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21163768" y3="-3.3346406" z3="5.13678435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35089063" y3="-3.72621844" z3="3.04316633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99080391" y3="-3.213658" z3="3.05875842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01542909" y3="-3.12601925" z3="4.44770897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37724154" y3="-3.63968394" z3="4.43231215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26576216" y3="-3.97043101" z3="2.49557941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03332352" y3="-3.07085241" z3="2.5523279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0876512" y3="-2.91417564" z3="4.98597672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31338672" y3="-3.81823442" z3="4.96841419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23003589" y3="-3.27412271" z3="6.22854718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42301656" y3="-3.90794685" z3="-0.62935167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18285699" y3="-3.40486181" z3="-1.08078485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51398582" y3="0.2412055" z3="-4.70337613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08315316" y3="-1.72155553" z3="0.01948537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90067948" y3="-0.97183777" z3="1.18043225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83560789" y3="-0.32314458" z3="1.50646996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37349487" y3="0.57046583" z3="1.2105456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44956197" y3="1.45120385" z3="-0.42612755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99122949" y3="-0.668054" z3="1.41237004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38807382" y3="1.78044637" z3="2.64069543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86929945" y3="-0.96311308" z3="2.08506696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63191968" y3="-0.35205087" z3="3.34318408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2068904" y3="0.75230334" z3="-1.24566607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31934646" y3="2.24499303" z3="-0.42754635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43127354" y3="1.92908418" z3="-0.59428657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01433557" y3="-1.02586177" z3="2.45530187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96228797" y3="-0.19955178" z3="1.17830162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87802516" y3="-1.51552567" z3="0.71680711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44486658" y3="1.25301484" z3="3.60906169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54030701" y3="2.38030345" z3="2.63888009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23894442" y3="2.48134616" z3="2.57500638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76691034" y3="-0.81005286" z3="3.84878539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5429461" y3="-0.52665221" z3="3.93079347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46098917" y3="0.73057636" z3="3.22419517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84296592" y3="-0.71271619" z3="0.99598794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40771152" y3="-2.0368884" z3="0.85783208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75522865" y3="-2.67945496" z3="1.90256909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55455486" y3="-1.98492332" z3="3.09174617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04280002" y3="-0.69624207" z3="3.28653987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69526181" y3="-0.06724156" z3="2.23086008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50620624" y3="-2.535003" z3="-0.10831474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3523632" y3="-3.68573711" z3="1.77993495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69411804" y3="-2.58030647" z3="4.11902151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86783285" y3="-0.18563758" z3="4.23437087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04550616" y3="0.9622141" z3="2.34578327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80366138" y3="0.46490263" z3="-4.28191966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78559232" y3="-0.50087339" z3="-4.4648144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43856796" y3="-1.69335757" z3="-5.08850059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15112898" y3="-1.92729979" z3="-5.56113711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82315547" y3="-0.95882357" z3="-5.36002107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04785551" y3="1.38902258" z3="-3.75223243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80507054" y3="-0.3521585" z3="-4.1082422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45236641" y3="-2.73987306" z3="-5.23104311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07835641" y3="-2.86836854" z3="-6.06111887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84521274" y3="-1.14723057" z3="-5.69222866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36604669" y3="-1.88246172" z3="5.05943384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31855859" y3="-3.72217329" z3="3.95619382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23098709" y3="-3.63956904" z3="-6.01231509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45433171" y3="-2.65525297" z3="-4.54826918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07059354" y3="1.15543161" z3="-1.48866478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10911309" y3="1.54390149" z3="-2.46657972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43910079" y3="1.48560591" z3="-1.68736653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84810305" y3="2.15146848" z3="-2.81695204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16598868" y3="1.18830132" z3="-0.92515093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90424279" y3="2.39366704" z3="-2.96200123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56815176" y3="2.21354532" z3="-3.63494943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8997102" y3="2.50864793" z3="-3.8052762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84622233" y3="2.48527837" z3="-4.40857627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23030136" y3="3.0166674" z3="-4.71544043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3995761" y3="3.14486839" z3="-3.32148768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28294314" y3="3.55915588" z3="-4.10587949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20896891" y3="4.15436122" z3="-2.72778487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95855796" y3="5.48789077" z3="-2.9489404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03828785" y3="3.86420322" z3="-2.08085186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59590823" y3="6.24323279" z3="-2.47901085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05861125" y3="4.9456504" z3="-4.32907573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88103544" y3="5.89298653" z3="-3.77188016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20662105" y3="5.24444664" z3="-4.94753722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6975445" y3="6.95663903" z3="-3.94776393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48243759" y3="-2.2010366" z3="-0.29111909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45704869" y3="-2.99366423" z3="-1.05841554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00490954" y3="-2.58403981" z3="0.60008531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10118942" y3="-1.38223436" z3="-0.70506893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18645866" y3="-1.42247361" z3="-1.15524356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32885381" y3="-0.38320098" z3="-1.50128566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10869546" y3="-1.54566982" z3="-0.95650081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43368559" y3="-2.07588901" z3="-2.00700099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3413,.0422,-.1884;7.3875,.1612,.4194;6.6475,.4342,-.3392;4.7267,1.2273,-2.2574;4.3885,.4247,-1.1802;2.7239,.8392,-3.6545;3.6302,1.7407,-3.1272;1.3755,2.5867,-4.602;1.555,1.2449,-4.3644;.4957,2.9237,-5.159;2.9207,-.4917,-3.4377;3.0989,.0331,-.9971;2.4029,-1.1102,-1.9975;.9314,-.985,-1.8189;3.1097,-2.4328,-1.8491;-.1355,-3.6084,.6606;-.0075,-5.2623,-4.7506;-.2366,-5.0017,-3.7137;-.8359,-4.3032,-1.0964;.7885,-4.599,-2.8601;-1.5543,-5.0817,-3.2583;-1.855,-4.7264,-1.9456;.5012,-4.2655,-1.535;1.8227,-4.5262,-3.2047;-2.3541,-5.3915,-3.9346;-2.893,-4.7557,-1.6049;-1.0246,-3.8525,.2236;-2.1643,-3.645,.8713;-3.0507,-4.1115,.4388;-2.1571,-3.512,2.3384;-2.2116,-3.3346,5.1368;-3.3509,-3.7262,3.0432;-.9908,-3.2137,3.0588;-1.0154,-3.126,4.4477;-3.3772,-3.6397,4.4323;-4.2658,-3.9704,2.4956;-.0333,-3.0709,2.5523;-.0877,-2.9142,4.986;-4.3134,-3.8182,4.9684;-2.23,-3.2741,6.2285;1.423,-3.9079,-.6294;2.1829,-3.4049,-1.0808;.514,.2412,-4.7034;-3.0832,-1.7216,.0195;-2.9007,-.9718,1.1804;-1.8356,-.3231,1.5065;-.3735,.5705,1.2105;-.4496,1.4512,-.4261;.9912,-.6681,1.4124;-.3881,1.7804,2.6407;-3.8693,-.9631,2.0851;-3.6319,-.3521,3.3432;-.2069,.7523,-1.2457;.3193,2.245,-.4275;-1.4313,1.9291,-.5943;1.0143,-1.0259,2.4553;1.9623,-.1996,1.1783;.878,-1.5155,.7168;-.4449,1.253,3.6091;.5403,2.3803,2.6389;-1.2389,2.4813,2.575;-2.7669,-.8101,3.8488;-4.5429,-.5267,3.9308;-3.461,.7306,3.2242;4.843,-.7127,.996;4.4077,-2.0369,.8578;3.7552,-2.6795,1.9026;3.5546,-1.9849,3.0917;4.0428,-.6962,3.2865;4.6953,-.0672,2.2309;4.5062,-2.535,-.1083;3.3524,-3.6857,1.7799;2.6941,-2.5803,4.119;3.8678,-.1856,4.2344;5.0455,.9622,2.3458;-.8037,.4649,-4.2819;-1.7856,-.5009,-4.4648;-1.4386,-1.6934,-5.0885;-.1511,-1.9273,-5.5611;.8232,-.9588,-5.36;-1.0479,1.389,-3.7522;-2.8051,-.3522,-4.1082;-2.4524,-2.7399,-5.231;.0784,-2.8684,-6.0611;1.8452,-1.1472,-5.6922;2.366,-1.8825,5.0594;2.3186,-3.7222,3.9562;-2.231,-3.6396,-6.0123;-3.4543,-2.6553,-4.5483;7.0706,1.1554,-1.4887;6.1091,1.5439,-2.4666;8.4391,1.4856,-1.6874;8.8481,2.1515,-2.817;9.166,1.1883,-.9252;9.9042,2.3937,-2.962;6.5682,2.2135,-3.6349;7.8997,2.5086,-3.8053;5.8462,2.4853,-4.4086;8.2303,3.0167,-4.7154;3.3996,3.1449,-3.3215;2.2829,3.5592,-4.1059;4.209,4.1544,-2.7278;3.9586,5.4879,-2.9489;5.0383,3.8642,-2.0809;4.5959,6.2432,-2.479;2.0586,4.9457,-4.3291;2.881,5.893,-3.7719;1.2066,5.2444,-4.9475;2.6975,6.9566,-3.9478;-4.4824,-2.201,-.2911;-4.457,-2.9937,-1.0584;-5.0049,-2.584,.6001;-5.1012,-1.3822,-.7051;-2.1865,-1.4225,-1.1552;-2.3289,-.3832,-1.5013;-1.1087,-1.5457,-.9565;-2.4337,-2.0759,-2.007;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412512943</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001956101697 0.000352501076 0.022251091656 0.005337800127</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030548299 -0.000526651 0.000094205 0.000128884 0.000246986 0.000386379 0.000408151 0.000491966 0.000610480 0.000800691 0.000923636 0.001102195 0.001275724 0.001292588 0.001376245 0.001396929 0.001692228 0.001780343 0.001828351 0.001957653 0.002166775 0.002516024 0.002571484 0.002725685 0.002847868 0.003138824 0.003232495 0.003449650 0.003862413 0.003975563 0.004355645 0.004762124 0.004826161 0.005078602 0.005912905 0.006072867 0.006273520 0.006571804 0.006799095 0.007588497 0.008027417 0.008165948 0.009170859 0.009502859 0.009917994 0.010720940 0.011045975 0.011594974 0.011659466 0.012127044 0.012859891 0.013164957 0.013992285 0.014374960 0.014961230 0.015353809 0.015595833 0.016044479 0.016072982 0.016866210 0.017377161 0.017922925 0.019014009 0.019406482 0.019829312 0.020785713 0.021209556 0.021361320 0.022393899 0.023116208 0.025100148 0.025916220 0.026650381 0.026867569 0.027389291 0.029123154 0.029378708 0.031427109 0.033230758 0.033468368 0.033845891 0.035796797 0.036825249 0.037400893 0.039364088 0.039932735 0.040743146 0.042003663 0.042775390 0.044389586 0.045310156 0.046696608 0.047584315 0.049176148 0.050279715 0.050794198 0.051021782 0.051215675 0.052473615 0.052525636 0.052849433 0.052947408 0.054469488 0.054680122 0.055454459 0.056172391 0.056487072 0.056500104 0.056995878 0.058382576 0.060275836 0.060650495 0.061567733 0.062061913 0.063059317 0.064362044 0.065092136 0.065769745 0.066304556 0.067766674 0.068887784 0.070172278 0.072661658 0.074331506 0.074472475 0.076130660 0.077788201 0.083546234 0.085144856 0.086843657 0.087213237 0.087935391 0.090338764 0.090812303 0.092970034 0.094581246 0.095199309 0.096311676 0.097268852 0.097841473 0.098800774 0.099585790 0.100208437 0.102324199 0.102735155 0.103205217 0.103435494 0.103936901 0.105618037 0.106773621 0.107343361 0.109384562 0.110505809 0.111227607 0.112405066 0.112593482 0.113934462 0.114860250 0.116254641 0.118921174 0.120581777 0.121661483 0.122443650 0.124256553 0.125413099 0.126234098 0.126922369 0.131737416 0.134877941 0.135582437 0.142624285 0.143513724 0.146881760 0.147183030 0.149608285 0.152038385 0.154636834 0.155901791 0.156615048 0.161302364 0.161730975 0.173309755 0.173864457 0.179361218 0.183935390 0.185066536 0.189000899 0.189978585 0.193892080 0.193932413 0.198302126 0.200106864 0.205098832 0.206845478 0.207140748 0.209755258 0.211823875 0.215666799 0.217501131 0.217723171 0.220528186 0.224936285 0.226210922 0.231879222 0.234861996 0.235385538 0.235773112 0.244505297 0.255742477 0.257127802 0.263135306 0.269696740 0.280285750 0.282873647 0.286162187 0.291467653 0.296347350 0.304196164 0.305605891 0.307212295 0.313918970 0.316432387 0.317273050 0.321918893 0.329364398 0.332429598 0.351616822 0.351933652 0.354753903 0.355670012 0.359887272 0.362701145 0.363373225 0.384106189 0.385987529 0.391618360 0.410439332 0.425284129 0.429964543 0.458131766 0.468578351 0.477373794 0.482528003 0.483530787 0.487138677 0.490351152 0.508947735 0.515069259 0.535053718 0.566045025 0.572719825 0.592020554 0.593498916 0.606267205 0.607724008 0.644485715 0.646465989 0.648724005 0.674209751 0.677597543 0.684920418 0.691493527 0.693315196 0.699411931 0.704335448 0.717130909 0.741177282 0.751207428 0.758614021 0.767465330 0.772438054 0.778751662 0.810502197 0.812740092 0.818582669 0.821607406 0.822879471 0.831422168 0.832443642 0.835757200 0.839303524 0.845253111 0.846454904 0.848297887 0.858597090 0.864915731 0.865817487 0.873243022 0.881263454 0.884343793 0.889304426 0.892117157 0.900586454 0.903843550 0.921319797 0.923354785 0.933267414 0.935124107 0.965151791 0.975674664 0.985651186 1.000935381 1.017634472 1.027368871 1.041361229 1.050281321 1.057293528 1.068196671 1.086536420 1.088488608 1.103527656 1.106219099 1.112264030 1.120011701 1.123899685 1.135479319 1.143110420 1.174104840 1.175618383 1.180947397 1.186265651 1.190145830 1.196002162 1.223959159 1.227833731 1.274231060 1.301008185 1.318947049 1.328029161 1.332625862 1.334945843 1.335756229 1.341446337 1.342830537 1.344893768 1.358821404 1.378430091 1.382906989 1.384106130 1.414514622 1.419597534 1.435227466 1.551442098 1.679590869 1.775256702</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">188</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34046884" y3="0.04673697" z3="-0.18872104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38661048" y3="0.16500907" z3="0.42061449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64732218" y3="0.43792589" z3="-0.33870619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72857439" y3="1.22998873" z3="-2.25950237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38865974" y3="0.42931317" z3="-1.18134664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7265467" y3="0.84208248" z3="-3.65703456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63373011" y3="1.74315179" z3="-3.13144507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38179958" y3="2.58875344" z3="-4.6111647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55906678" y3="1.24766499" z3="-4.36912602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50332768" y3="2.9251075" z3="-5.17060582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92093032" y3="-0.48844695" z3="-3.43731985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09858988" y3="0.0401582" z3="-0.99795488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4015447" y3="-1.10393563" z3="-1.99654826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93013464" y3="-0.97704842" z3="-1.81899301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10697082" y3="-2.42717079" z3="-1.84588927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13823556" y3="-3.61209014" z3="0.66376065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01042786" y3="-5.25186254" z3="-4.75121478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23932961" y3="-4.99448838" z3="-3.7135227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83754371" y3="-4.30505086" z3="-1.09418704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78610933" y3="-4.59147682" z3="-2.85971875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55602609" y3="-5.08001854" z3="-3.25735848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85585871" y3="-4.73000248" z3="-1.94326152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.498655" y3="-4.26133795" z3="-1.53372644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8199468" y3="-4.51538001" z3="-3.20508596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35558517" y3="-5.38991647" z3="-3.93397247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89269483" y3="-4.76508544" z3="-1.60143045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02684321" y3="-3.85687786" z3="0.22664757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16670311" y3="-3.6492345" z3="0.87388599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05328507" y3="-4.11480393" z3="0.44093415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.159792" y3="-3.51674822" z3="2.34113551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2143641" y3="-3.34071262" z3="5.13960258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35324261" y3="-3.73173662" z3="3.04592428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99317651" y3="-3.21927307" z3="3.06163577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01800885" y3="-3.13182803" z3="4.45056832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37961697" y3="-3.64608514" z3="4.43509771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26705874" y3="-3.97702983" z3="2.49850658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03550728" y3="-3.07660629" z3="2.55575658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08915157" y3="-2.92110987" z3="4.98878445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31524128" y3="-3.82594025" z3="4.97136956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23276783" y3="-3.28088579" z3="6.23138456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41865385" y3="-3.9012307" z3="-0.62825937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17876187" y3="-3.39751575" z3="-1.07935998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51725237" y3="0.24367793" z3="-4.70684333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08505215" y3="-1.72447339" z3="0.02254134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9043963" y3="-0.97584617" z3="1.18471168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84149" y3="-0.32580976" z3="1.51351845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37699835" y3="0.56556427" z3="1.21725898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45647936" y3="1.45264582" z3="-0.41587853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98712762" y3="-0.67533023" z3="1.41113631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38595813" y3="1.76996623" z3="2.65230761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87441856" y3="-0.96953602" z3="2.08777812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63974878" y3="-0.3595513" z3="3.34705189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21013172" y3="0.75841617" z3="-1.23670718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31398103" y3="2.24744699" z3="-0.41513347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4386717" y3="1.9282193" z3="-0.58334657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01307146" y3="-1.03511287" z3="2.45323228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9578508" y3="-0.20645451" z3="1.17550445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87219856" y3="-1.52139804" z3="0.71427755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44190322" y3="1.23875491" z3="3.61915606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5431626" y3="2.36849306" z3="2.65061968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2358363" y3="2.47309908" z3="2.59112838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77546751" y3="-0.81789249" z3="3.8539875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55188183" y3="-0.53509105" z3="3.93261956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46949397" y3="0.72308152" z3="3.22931337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84085105" y3="-0.70748259" z3="0.99557956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40894013" y3="-2.03267615" z3="0.85831978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75675298" y3="-2.675787" z3="1.90291328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55326325" y3="-1.98078526" z3="3.0914156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0378252" y3="-0.69070462" z3="3.28526494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69009238" y3="-0.06115693" z3="2.22978346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51036083" y3="-2.53156949" z3="-0.10680643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35671321" y3="-3.68308809" z3="1.78092346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69196426" y3="-2.57703328" z3="4.11741842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85994375" y3="-0.17953839" z3="4.2319005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03816328" y3="0.96918429" z3="2.34454478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79973978" y3="0.46742364" z3="-4.28375288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7818278" y3="-0.49732908" z3="-4.46119614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4369152" y3="-1.68987499" z3="-5.08712047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15087591" y3="-1.92436074" z3="-5.56422208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82463278" y3="-0.95620827" z3="-5.36126954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04273217" y3="1.39159933" z3="-3.75251152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80049816" y3="-0.34855694" z3="-4.10178482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45175017" y3="-2.73621192" z3="-5.23027521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07713802" y3="-2.86516157" z3="-6.06536694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84633209" y3="-1.14475772" z3="-5.6953374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36029393" y3="-1.87893338" z3="5.05544449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31711961" y3="-3.71981941" z3="3.95376604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23126112" y3="-3.63594698" z3="-6.01301816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45316375" y3="-2.64998353" z3="-4.54816458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07205989" y3="1.15771747" z3="-1.48863728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11175618" y3="1.54553192" z3="-2.46792165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44093588" y3="1.48614999" z3="-1.68675036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85135319" y3="2.14937915" z3="-2.81704443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16687831" y3="1.18922093" z3="-0.9235086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90811436" y3="2.3922326" z3="-2.96106695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57252148" y3="2.21299292" z3="-3.63695379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90421959" y3="2.50603836" z3="-3.80671965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8515036" y3="2.48410081" z3="-4.41164666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23604183" y3="3.01353148" z3="-4.71717051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40537631" y3="3.147247" z3="-3.3300497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29060383" y3="3.56080779" z3="-4.11748777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21552307" y3="4.15759371" z3="-2.7384919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96827734" y3="5.49059353" z3="-2.96521275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04382405" y3="3.86799599" z3="-2.08992107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60827331" y3="6.24473839" z3="-2.49976941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06878967" y3="4.94712818" z3="-4.34538663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89212997" y3="5.89525305" z3="-3.79027623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21751052" y3="5.24583889" z3="-4.9650356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71066222" y3="6.95871479" z3="-3.97001502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48417312" y3="-2.2044987" z3="-0.28908757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45745123" y3="-2.99529959" z3="-1.05791084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00660505" y3="-2.5894169" z3="0.60160842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10295167" y3="-1.385033" z3="-0.70153422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18759976" y3="-1.4246013" z3="-1.15169715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32619922" y3="-0.38192547" z3="-1.49576414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10986788" y3="-1.54919957" z3="-0.95088392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4291256" y3="-2.07723863" z3="-2.00253923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3405,.0467,-.1887;7.3866,.165,.4206;6.6473,.4379,-.3387;4.7286,1.23,-2.2595;4.3887,.4293,-1.1813;2.7265,.8421,-3.657;3.6337,1.7432,-3.1314;1.3818,2.5888,-4.6112;1.5591,1.2477,-4.3691;.5033,2.9251,-5.1706;2.9209,-.4884,-3.4373;3.0986,.0402,-.998;2.4015,-1.1039,-1.9965;.9301,-.977,-1.819;3.107,-2.4272,-1.8459;-.1382,-3.6121,.6638;-.0104,-5.2519,-4.7512;-.2393,-4.9945,-3.7135;-.8375,-4.3051,-1.0942;.7861,-4.5915,-2.8597;-1.556,-5.08,-3.2574;-1.8559,-4.73,-1.9433;.4987,-4.2613,-1.5337;1.8199,-4.5154,-3.2051;-2.3556,-5.3899,-3.934;-2.8927,-4.7651,-1.6014;-1.0268,-3.8569,.2266;-2.1667,-3.6492,.8739;-3.0533,-4.1148,.4409;-2.1598,-3.5167,2.3411;-2.2144,-3.3407,5.1396;-3.3532,-3.7317,3.0459;-.9932,-3.2193,3.0616;-1.018,-3.1318,4.4506;-3.3796,-3.6461,4.4351;-4.2671,-3.977,2.4985;-.0355,-3.0766,2.5558;-.0892,-2.9211,4.9888;-4.3152,-3.8259,4.9714;-2.2328,-3.2809,6.2314;1.4187,-3.9012,-.6283;2.1788,-3.3975,-1.0794;.5173,.2437,-4.7068;-3.0851,-1.7245,.0225;-2.9044,-.9758,1.1847;-1.8415,-.3258,1.5135;-.377,.5656,1.2173;-.4565,1.4526,-.4159;.9871,-.6753,1.4111;-.386,1.77,2.6523;-3.8744,-.9695,2.0878;-3.6397,-.3596,3.3471;-.2101,.7584,-1.2367;.314,2.2474,-.4151;-1.4387,1.9282,-.5833;1.0131,-1.0351,2.4532;1.9579,-.2065,1.1755;.8722,-1.5214,.7143;-.4419,1.2388,3.6192;.5432,2.3685,2.6506;-1.2358,2.4731,2.5911;-2.7755,-.8179,3.854;-4.5519,-.5351,3.9326;-3.4695,.7231,3.2293;4.8409,-.7075,.9956;4.4089,-2.0327,.8583;3.7568,-2.6758,1.9029;3.5533,-1.9808,3.0914;4.0378,-.6907,3.2853;4.6901,-.0612,2.2298;4.5104,-2.5316,-.1068;3.3567,-3.6831,1.7809;2.692,-2.577,4.1174;3.8599,-.1795,4.2319;5.0382,.9692,2.3445;-.7997,.4674,-4.2838;-1.7818,-.4973,-4.4612;-1.4369,-1.6899,-5.0871;-.1509,-1.9244,-5.5642;.8246,-.9562,-5.3613;-1.0427,1.3916,-3.7525;-2.8005,-.3486,-4.1018;-2.4518,-2.7362,-5.2303;.0771,-2.8652,-6.0654;1.8463,-1.1448,-5.6953;2.3603,-1.8789,5.0554;2.3171,-3.7198,3.9538;-2.2313,-3.6359,-6.013;-3.4532,-2.65,-4.5482;7.0721,1.1577,-1.4886;6.1118,1.5455,-2.4679;8.4409,1.4861,-1.6868;8.8514,2.1494,-2.817;9.1669,1.1892,-.9235;9.9081,2.3922,-2.9611;6.5725,2.213,-3.637;7.9042,2.506,-3.8067;5.8515,2.4841,-4.4116;8.236,3.0135,-4.7172;3.4054,3.1472,-3.33;2.2906,3.5608,-4.1175;4.2155,4.1576,-2.7385;3.9683,5.4906,-2.9652;5.0438,3.868,-2.0899;4.6083,6.2447,-2.4998;2.0688,4.9471,-4.3454;2.8921,5.8953,-3.7903;1.2175,5.2458,-4.965;2.7107,6.9587,-3.97;-4.4842,-2.2045,-.2891;-4.4575,-2.9953,-1.0579;-5.0066,-2.5894,.6016;-5.103,-1.385,-.7015;-2.1876,-1.4246,-1.1517;-2.3262,-.3819,-1.4958;-1.1099,-1.5492,-.9509;-2.4291,-2.0772,-2.0025;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416152499</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001760344150 0.000319543777 0.020131091708 0.005339820319</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030561149 -0.000602222 0.000093173 0.000122341 0.000248846 0.000386209 0.000407194 0.000493121 0.000611132 0.000801336 0.000925475 0.001102327 0.001275874 0.001294035 0.001378578 0.001397137 0.001692280 0.001783360 0.001829594 0.001958321 0.002166518 0.002519689 0.002578162 0.002726728 0.002847804 0.003140142 0.003232717 0.003449616 0.003867873 0.003976316 0.004355923 0.004771749 0.004827685 0.005078646 0.005912960 0.006074057 0.006275224 0.006571977 0.006801662 0.007588271 0.008029587 0.008171391 0.009170787 0.009511826 0.009919266 0.010725142 0.011048234 0.011595059 0.011667292 0.012136913 0.012860092 0.013172299 0.013998828 0.014375399 0.014973545 0.015356194 0.015596353 0.016059496 0.016073700 0.016867245 0.017397802 0.017926892 0.019050590 0.019407733 0.019838389 0.020791148 0.021209607 0.021365544 0.022394354 0.023116543 0.025104101 0.025916890 0.026654716 0.026869330 0.027389794 0.029136996 0.029379197 0.031427295 0.033232466 0.033468602 0.033845868 0.035797005 0.036825457 0.037401605 0.039368699 0.039942047 0.040743213 0.042004727 0.042781809 0.044389927 0.045314263 0.046697210 0.047584532 0.049176169 0.050279858 0.050794421 0.051021987 0.051215909 0.052473897 0.052526202 0.052850055 0.052950065 0.054470545 0.054680459 0.055455237 0.056172381 0.056487197 0.056500492 0.056998486 0.058383038 0.060275996 0.060653167 0.061580292 0.062062667 0.063063668 0.064362200 0.065097753 0.065773721 0.066309162 0.067767299 0.068892729 0.070173867 0.072661701 0.074332438 0.074473420 0.076131045 0.077791998 0.083550541 0.085148104 0.086845313 0.087216612 0.087944646 0.090345199 0.090816545 0.092971936 0.094583292 0.095200691 0.096311683 0.097269365 0.097847756 0.098805718 0.099585762 0.100211932 0.102326999 0.102740376 0.103220622 0.103437444 0.103938045 0.105618791 0.106786914 0.107346142 0.109430243 0.110517165 0.111391759 0.112451851 0.112650267 0.113989068 0.114888410 0.116254659 0.118936642 0.120582752 0.121717544 0.122475668 0.124261173 0.125421178 0.126236666 0.126934816 0.131737718 0.134878245 0.135582884 0.142650900 0.143516791 0.146891647 0.147186715 0.149609437 0.152051308 0.154639846 0.155908465 0.156616574 0.161306653 0.161730919 0.173312074 0.173882190 0.179362163 0.183939286 0.185077297 0.189004426 0.189983839 0.193892718 0.193933820 0.198302825 0.200109761 0.205098581 0.206845675 0.207141248 0.209755783 0.211972797 0.215690486 0.217529585 0.217754798 0.220528240 0.224936536 0.226212362 0.231879254 0.234866051 0.235389868 0.235775203 0.244505589 0.255752666 0.257128181 0.263149454 0.269701445 0.280286358 0.282873641 0.286163728 0.291469609 0.296372670 0.304200165 0.305606667 0.307212440 0.313923243 0.316432627 0.317273147 0.321918932 0.329390753 0.332439497 0.351633050 0.351939391 0.354754157 0.355671681 0.359889634 0.362701225 0.363385956 0.384111676 0.385989400 0.391621048 0.410442376 0.425284954 0.429971106 0.458155685 0.468582840 0.477379143 0.482531654 0.483533757 0.487173641 0.490357923 0.508973362 0.515094355 0.535066712 0.566049850 0.572726702 0.592020623 0.593507188 0.606268062 0.607724219 0.644486739 0.646472120 0.648724963 0.674210661 0.677617068 0.684920458 0.691493797 0.693315317 0.699422794 0.704343417 0.717156364 0.741177283 0.751212073 0.758640468 0.767475428 0.772448577 0.778751710 0.810508961 0.812746995 0.818621522 0.821607511 0.822918625 0.831422227 0.832482959 0.835765359 0.839515320 0.845262025 0.846533064 0.848341189 0.858626016 0.864959038 0.865818885 0.873266928 0.881339853 0.884345794 0.889304457 0.892201430 0.900586606 0.903844752 0.921563382 0.923357544 0.933356271 0.935124332 0.965151816 0.975678383 0.985654402 1.000944828 1.017681495 1.027376453 1.041373571 1.050281319 1.057294040 1.068207129 1.086536663 1.088494862 1.103548333 1.106219334 1.112268574 1.120219560 1.123966122 1.135483160 1.143115182 1.174119747 1.175620775 1.180956344 1.186274616 1.190152787 1.196006198 1.223977273 1.227855819 1.274232281 1.301016617 1.318947241 1.328029542 1.332628465 1.334947939 1.335758416 1.341449270 1.342830539 1.344894359 1.358829976 1.378437221 1.382907785 1.384106693 1.414592062 1.419604676 1.435228428 1.551442138 1.679732676 1.775363100</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">189</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34013034" y3="0.052563" z3="-0.18967502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38596363" y3="0.16731309" z3="0.42012153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64740986" y3="0.44094813" z3="-0.3396303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73081801" y3="1.23430995" z3="-2.26203903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38919018" y3="0.43579118" z3="-1.18289144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72995907" y3="0.8449852" z3="-3.66129662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63720239" y3="1.74667235" z3="-3.13618817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38720316" y3="2.59128239" z3="-4.61966243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56334716" y3="1.25027115" z3="-4.37499838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50913909" y3="2.92761819" z3="-5.17973083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92282326" y3="-0.48524865" z3="-3.43831449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09841561" y3="0.04842517" z3="-0.99966308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39983729" y3="-1.09608027" z3="-1.9968209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92853654" y3="-0.96508271" z3="-1.82157673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10213635" y3="-2.42048912" z3="-1.84240873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14170119" y3="-3.61720571" z3="0.66938939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01274061" y3="-5.24429063" z3="-4.74985296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24162998" y3="-4.98969266" z3="-3.7114747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84072087" y3="-4.30602635" z3="-1.09059608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78246974" y3="-4.58350263" z3="-2.85818906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55793669" y3="-5.08032194" z3="-3.2542706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85852352" y3="-4.73287843" z3="-1.93951773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4953044" y3="-4.25716223" z3="-1.53125523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81552891" y3="-4.50231829" z3="-3.20439617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35593164" y3="-5.39316037" z3="-3.93056844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89569362" y3="-4.77073823" z3="-1.5967335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03033675" y3="-3.86068102" z3="0.23111543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17063457" y3="-3.65232005" z3="0.87768918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05716594" y3="-4.11757815" z3="0.44429177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16376705" y3="-3.52104441" z3="2.34513638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21798351" y3="-3.34571558" z3="5.14368262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35746339" y3="-3.73525832" z3="3.04972311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99740558" y3="-3.22384292" z3="3.06570428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02157585" y3="-3.13741618" z3="4.45478471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38396471" y3="-3.64932368" z3="4.4388961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27250854" y3="-3.9782831" z3="2.50200192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04069691" y3="-3.07973838" z3="2.55959227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09331172" y3="-2.92609859" z3="4.99274836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32073397" y3="-3.82661899" z3="4.97494238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23666115" y3="-3.28554368" z3="6.23543149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41543783" y3="-3.89559697" z3="-0.62575907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17439235" y3="-3.39015663" z3="-1.07659293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52102262" y3="0.24649512" z3="-4.71019685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08530249" y3="-1.72815479" z3="0.02600155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90746515" y3="-0.97993459" z3="1.18887558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84408143" y3="-0.33091425" z3="1.52030227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37908563" y3="0.55871219" z3="1.22385638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46187681" y3="1.45302811" z3="-0.40507807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98394598" y3="-0.68441134" z3="1.40816058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38199604" y3="1.75552409" z3="2.66510072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87964517" y3="-0.97308435" z3="2.0898041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64729602" y3="-0.36348459" z3="3.34999003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.218918" y3="0.76177174" z3="-1.230973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30538233" y3="2.2486264" z3="-0.4017115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44515515" y3="1.93008406" z3="-0.5670498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01369633" y3="-1.04654156" z3="2.44927115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95372739" y3="-0.21529875" z3="1.17005317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86615017" y3="-1.52890872" z3="0.7098847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43565329" y3="1.21862382" z3="3.62869922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54862558" y3="2.35195853" z3="2.66426681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23077417" y3="2.46023047" z3="2.61057698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78346057" y3="-0.82130948" z3="3.85814485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56036533" y3="-0.53966127" z3="3.93417271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47719981" y3="0.71926123" z3="3.23296763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83984084" y3="-0.70212212" z3="0.99423554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41126653" y3="-2.02845103" z3="0.85652703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.758987" y3="-2.67292672" z3="1.90028815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55180284" y3="-1.9780525" z3="3.08818687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03267238" y3="-0.68660282" z3="3.28240925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68515191" y3="-0.05574056" z3="2.22783296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5138338" y3="-2.52697601" z3="-0.10927638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36081088" y3="-3.68110852" z3="1.77750653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69046315" y3="-2.57598468" z3="4.11326293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85166617" y3="-0.17549707" z3="4.22850993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02998662" y3="0.97548652" z3="2.34240166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79508509" y3="0.46992914" z3="-4.28369626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77749831" y3="-0.49589511" z3="-4.46253736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43279476" y3="-1.68816193" z3="-5.08747162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14689975" y3="-1.92198019" z3="-5.56508648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82806252" y3="-0.95363242" z3="-5.36755147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03716726" y3="1.39402359" z3="-3.75286704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79572873" y3="-0.34747111" z3="-4.1018437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44749135" y3="-2.73438659" z3="-5.22813801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08083155" y3="-2.86286329" z3="-6.06624599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84914765" y3="-1.14193202" z3="-5.70318262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35656623" y3="-1.87857926" z3="5.05173227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31946004" y3="-3.71943463" z3="3.95013995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22719767" y3="-3.63537652" z3="-6.00833518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44919605" y3="-2.64783056" z3="-4.54524754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07358598" y3="1.15934349" z3="-1.48972694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11434503" y3="1.54729412" z3="-2.47002397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44305741" y3="1.48652494" z3="-1.68689567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85511511" y3="2.14853506" z3="-2.81738053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16813302" y3="1.18979585" z3="-0.92273131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91192952" y3="2.38881464" z3="-2.96108836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57675739" y3="2.21280831" z3="-3.6394158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90903371" y3="2.50478624" z3="-3.80823919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85676485" y3="2.48390807" z3="-4.41502398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24202021" y3="3.00984981" z3="-4.71910363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41031147" y3="3.15054899" z3="-3.33820439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29654537" y3="3.56371754" z3="-4.12734979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22087182" y3="4.16131609" z3="-2.74811947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97508424" y3="5.49422455" z3="-2.97791213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04776513" y3="3.87258801" z3="-2.09744479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61355382" y3="6.25048819" z3="-2.51089683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0768866" y3="4.9494402" z3="-4.35933827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90083044" y3="5.8976814" z3="-3.80590562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22710296" y3="5.24717887" z3="-4.98138665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72118743" y3="6.96068705" z3="-3.98887414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48349496" y3="-2.20710257" z3="-0.29036181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45499069" y3="-2.99701207" z3="-1.0600895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00871777" y3="-2.59345342" z3="0.59776373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10090186" y3="-1.38696321" z3="-0.7033559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1848287" y3="-1.42680783" z3="-1.14556145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32635707" y3="-0.38697545" z3="-1.49059012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10799809" y3="-1.54930386" z3="-0.94352127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42885299" y3="-2.07905711" z3="-1.99908239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3401,.0526,-.1897;7.386,.1673,.4201;6.6474,.4409,-.3396;4.7308,1.2343,-2.262;4.3892,.4358,-1.1829;2.73,.845,-3.6613;3.6372,1.7467,-3.1362;1.3872,2.5913,-4.6197;1.5633,1.2503,-4.375;.5091,2.9276,-5.1797;2.9228,-.4852,-3.4383;3.0984,.0484,-.9997;2.3998,-1.0961,-1.9968;.9285,-.9651,-1.8216;3.1021,-2.4205,-1.8424;-.1417,-3.6172,.6694;-.0127,-5.2443,-4.7499;-.2416,-4.9897,-3.7115;-.8407,-4.306,-1.0906;.7825,-4.5835,-2.8582;-1.5579,-5.0803,-3.2543;-1.8585,-4.7329,-1.9395;.4953,-4.2572,-1.5313;1.8155,-4.5023,-3.2044;-2.3559,-5.3932,-3.9306;-2.8957,-4.7707,-1.5967;-1.0303,-3.8607,.2311;-2.1706,-3.6523,.8777;-3.0572,-4.1176,.4443;-2.1638,-3.521,2.3451;-2.218,-3.3457,5.1437;-3.3575,-3.7353,3.0497;-.9974,-3.2238,3.0657;-1.0216,-3.1374,4.4548;-3.384,-3.6493,4.4389;-4.2725,-3.9783,2.502;-.0407,-3.0797,2.5596;-.0933,-2.9261,4.9927;-4.3207,-3.8266,4.9749;-2.2367,-3.2855,6.2354;1.4154,-3.8956,-.6258;2.1744,-3.3902,-1.0766;.521,.2465,-4.7102;-3.0853,-1.7282,.026;-2.9075,-.9799,1.1889;-1.8441,-.3309,1.5203;-.3791,.5587,1.2239;-.4619,1.453,-.4051;.9839,-.6844,1.4082;-.382,1.7555,2.6651;-3.8796,-.9731,2.0898;-3.6473,-.3635,3.35;-.2189,.7618,-1.231;.3054,2.2486,-.4017;-1.4452,1.9301,-.567;1.0137,-1.0465,2.4493;1.9537,-.2153,1.1701;.8662,-1.5289,.7099;-.4357,1.2186,3.6287;.5486,2.352,2.6643;-1.2308,2.4602,2.6106;-2.7835,-.8213,3.8581;-4.5604,-.5397,3.9342;-3.4772,.7193,3.233;4.8398,-.7021,.9942;4.4113,-2.0285,.8565;3.759,-2.6729,1.9003;3.5518,-1.9781,3.0882;4.0327,-.6866,3.2824;4.6852,-.0557,2.2278;4.5138,-2.527,-.1093;3.3608,-3.6811,1.7775;2.6905,-2.576,4.1133;3.8517,-.1755,4.2285;5.03,.9755,2.3424;-.7951,.4699,-4.2837;-1.7775,-.4959,-4.4625;-1.4328,-1.6882,-5.0875;-.1469,-1.922,-5.5651;.8281,-.9536,-5.3676;-1.0372,1.394,-3.7529;-2.7957,-.3475,-4.1018;-2.4475,-2.7344,-5.2281;.0808,-2.8629,-6.0662;1.8491,-1.1419,-5.7032;2.3566,-1.8786,5.0517;2.3195,-3.7194,3.9501;-2.2272,-3.6354,-6.0083;-3.4492,-2.6478,-4.5452;7.0736,1.1593,-1.4897;6.1143,1.5473,-2.47;8.4431,1.4865,-1.6869;8.8551,2.1485,-2.8174;9.1681,1.1898,-.9227;9.9119,2.3888,-2.9611;6.5768,2.2128,-3.6394;7.909,2.5048,-3.8082;5.8568,2.4839,-4.415;8.242,3.0098,-4.7191;3.4103,3.1505,-3.3382;2.2965,3.5637,-4.1273;4.2209,4.1613,-2.7481;3.9751,5.4942,-2.9779;5.0478,3.8726,-2.0974;4.6136,6.2505,-2.5109;2.0769,4.9494,-4.3593;2.9008,5.8977,-3.8059;1.2271,5.2472,-4.9814;2.7212,6.9607,-3.9889;-4.4835,-2.2071,-.2904;-4.455,-2.997,-1.0601;-5.0087,-2.5935,.5978;-5.1009,-1.387,-.7034;-2.1848,-1.4268,-1.1456;-2.3264,-.387,-1.4906;-1.108,-1.5493,-.9435;-2.4289,-2.0791,-1.9991;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417739873</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001801500291 0.000325164583 0.025825898256 0.005334702755</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030577593 -0.000914185 0.000042111 0.000115562 0.000160776 0.000238008 0.000403570 0.000426692 0.000581127 0.000794013 0.000925166 0.001029908 0.001262036 0.001293675 0.001349958 0.001399567 0.001651577 0.001767957 0.001818323 0.001914770 0.002158883 0.002517951 0.002544812 0.002698696 0.002848375 0.003139272 0.003225909 0.003451242 0.003873076 0.003962089 0.004362817 0.004781067 0.004818494 0.005079803 0.005913170 0.006055569 0.006237890 0.006570930 0.006807721 0.007591514 0.008037886 0.008176677 0.009167326 0.009523485 0.009929960 0.010721053 0.011053859 0.011592700 0.011680803 0.012155733 0.012849118 0.013167595 0.013993820 0.014374242 0.014994079 0.015354082 0.015595576 0.016064716 0.016107618 0.016871197 0.017430706 0.017932954 0.019080568 0.019411304 0.019837130 0.020790919 0.021208716 0.021364578 0.022387102 0.023117498 0.025106141 0.025915492 0.026640275 0.026874826 0.027392188 0.029155486 0.029377445 0.031407315 0.033233727 0.033467145 0.033842912 0.035793970 0.036812585 0.037404089 0.039368656 0.039942829 0.040745427 0.042013625 0.042804888 0.044366110 0.045261826 0.046697944 0.047579912 0.049175463 0.050264455 0.050796231 0.051019222 0.051217320 0.052474520 0.052529704 0.052850411 0.052951067 0.054469532 0.054681754 0.055456335 0.056173754 0.056486736 0.056493081 0.057002770 0.058385555 0.060271772 0.060647134 0.061582992 0.062062545 0.063040992 0.064358495 0.065099161 0.065773646 0.066310157 0.067768839 0.068901481 0.070171553 0.072649239 0.074335121 0.074466078 0.076128366 0.077797346 0.083555801 0.085154490 0.086846465 0.087220012 0.087949828 0.090355822 0.090822249 0.092971848 0.094586448 0.095199041 0.096310422 0.097268777 0.097852054 0.098809135 0.099584496 0.100216923 0.102322823 0.102745278 0.103233195 0.103436536 0.103939646 0.105606957 0.106791537 0.107344742 0.109464888 0.110521904 0.111508524 0.112471846 0.112797371 0.114118880 0.114941399 0.116253933 0.118931078 0.120587286 0.121767394 0.122545379 0.124266295 0.125432086 0.126234614 0.126950292 0.131734691 0.134877518 0.135589574 0.142691741 0.143513329 0.146896230 0.147192377 0.149578687 0.152066580 0.154648260 0.155937288 0.156608442 0.161319718 0.161730332 0.173288990 0.173893930 0.179372826 0.183934337 0.185085331 0.189004715 0.189996553 0.193894226 0.193922203 0.198302928 0.200110771 0.205063009 0.206845909 0.207141497 0.209755474 0.212145264 0.215702463 0.217559194 0.217788646 0.220527640 0.224939784 0.226211820 0.231880013 0.234873512 0.235396904 0.235779828 0.244506975 0.255761003 0.257131711 0.263155880 0.269709178 0.280287277 0.282874049 0.286168806 0.291468816 0.296384584 0.304203662 0.305609710 0.307214385 0.313930230 0.316433452 0.317280471 0.321919052 0.329412813 0.332451795 0.351658078 0.351936661 0.354753490 0.355665557 0.359875308 0.362702029 0.363393454 0.384143145 0.385989853 0.391622571 0.410442561 0.425284793 0.429976674 0.458197923 0.468586686 0.477411909 0.482559917 0.483533664 0.487226644 0.490383378 0.508994196 0.515122205 0.535083734 0.566059215 0.572731299 0.592012857 0.593511148 0.606268277 0.607719559 0.644458500 0.646483113 0.648735711 0.674210960 0.677639179 0.684919515 0.691493511 0.693313567 0.699429249 0.704348782 0.717169042 0.741176683 0.751214536 0.758662575 0.767496311 0.772456014 0.778752024 0.810498845 0.812751624 0.818666299 0.821607856 0.822950179 0.831422803 0.832520901 0.835770558 0.839751235 0.845273332 0.846591088 0.848394148 0.858666438 0.864988794 0.865818945 0.873308156 0.881447205 0.884350605 0.889312137 0.892321068 0.900582924 0.903843497 0.921819919 0.923365053 0.933458216 0.935125500 0.965160706 0.975677027 0.985653728 1.000959716 1.017712026 1.027380862 1.041380872 1.050279537 1.057294617 1.068221373 1.086538495 1.088504092 1.103568836 1.106217120 1.112268869 1.120430298 1.124014703 1.135485206 1.143129284 1.174134568 1.175636130 1.180958629 1.186271377 1.190159057 1.196021374 1.223978960 1.227904622 1.274230726 1.301016406 1.318948208 1.328018527 1.332631200 1.334919585 1.335758900 1.341449773 1.342813297 1.344888269 1.358857477 1.378427430 1.382847317 1.384089356 1.414573901 1.419602002 1.435206559 1.551441990 1.679858765 1.775333681</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">190</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33977673" y3="0.05674457" z3="-0.18850554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38487658" y3="0.17555675" z3="0.42433589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64695895" y3="0.44776349" z3="-0.3365651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73169994" y3="1.23692045" z3="-2.26231661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38937213" y3="0.43871316" z3="-1.18275259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73219811" y3="0.84619023" z3="-3.66261196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63933947" y3="1.74829503" z3="-3.1384775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39315572" y3="2.58978753" z3="-4.62974642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5671379" y3="1.25006355" z3="-4.37953853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51656175" y3="2.92456536" z3="-5.19314424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92408182" y3="-0.48393205" z3="-3.43746482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0985956" y3="0.05131634" z3="-0.9992396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39858131" y3="-1.09273526" z3="-1.9960286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92739083" y3="-0.95913179" z3="-1.8220626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09827124" y3="-2.41854024" z3="-1.84038436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14669065" y3="-3.62134483" z3="0.67111003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02119135" y3="-5.2362746" z3="-4.75139166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24937466" y3="-4.98405003" z3="-3.71222492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84640606" y3="-4.30770709" z3="-1.08923541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77540466" y3="-4.5777838" z3="-2.85926639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56477547" y3="-5.078689" z3="-3.25371056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86407153" y3="-4.73540495" z3="-1.93761311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48861162" y3="-4.25390795" z3="-1.5315206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80785716" y3="-4.49363586" z3="-3.20670608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36428723" y3="-5.39001622" z3="-3.93009809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89970828" y3="-4.77859352" z3="-1.59351611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03521578" y3="-3.8651501" z3="0.23354466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17494218" y3="-3.65539217" z3="0.88047004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06259547" y3="-4.11857851" z3="0.44708033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16738633" y3="-3.52428705" z3="2.34787824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21970209" y3="-3.34973305" z3="5.14643599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36081535" y3="-3.73753292" z3="3.05327625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99966799" y3="-3.22926586" z3="3.06780395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02354807" y3="-3.1421769" z3="4.45666967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38569086" y3="-3.65311669" z3="4.44262604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27543589" y3="-3.98072414" z3="2.5063846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04095308" y3="-3.0894976" z3="2.56142417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09382229" y3="-2.9327891" z3="4.99393711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32061995" y3="-3.83254692" z3="4.97945128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23707158" y3="-3.29079547" z3="6.23833003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40773493" y3="-3.89079118" z3="-0.62639714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16812584" y3="-3.38607787" z3="-1.07700267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52472455" y3="0.24560357" z3="-4.71434686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0865532" y3="-1.72853294" z3="0.02918468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90870377" y3="-0.98255865" z3="1.19360388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84628868" y3="-0.33476864" z3="1.52784164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38005524" y3="0.55413305" z3="1.23163773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46592776" y3="1.45421806" z3="-0.39410519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9829017" y3="-0.69036814" z3="1.40858132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37916754" y3="1.7453691" z3="2.6777641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88164989" y3="-0.97682282" z3="2.09346171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65117101" y3="-0.36754404" z3="3.35369514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22047957" y3="0.76686507" z3="-1.22098501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3037259" y3="2.24985251" z3="-0.38930021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44909969" y3="1.92951993" z3="-0.55515079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01525614" y3="-1.05551849" z3="2.44861182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95268224" y3="-0.22087747" z3="1.16980824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86303903" y3="-1.53311345" z3="0.70827716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43075589" y3="1.20459529" z3="3.63942039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55112391" y3="2.34199856" z3="2.67714045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22810606" y3="2.45029073" z3="2.6283801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78966278" y3="-0.82693592" z3="3.86393438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56587292" y3="-0.54200422" z3="3.93556257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47849209" y3="0.71492894" z3="3.23691747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83928953" y3="-0.69871955" z3="0.9946411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41181213" y3="-2.02523823" z3="0.85579424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76023666" y3="-2.67118841" z3="1.89901973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55277315" y3="-1.97762647" z3="3.08771901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03280709" y3="-0.68597068" z3="3.28317091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68447887" y3="-0.05359134" z3="2.22900055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51621632" y3="-2.52328802" z3="-0.10914123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36342988" y3="-3.67955699" z3="1.7757217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69097199" y3="-2.57675522" z3="4.11167781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85227597" y3="-0.17603048" z3="4.23034473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02924061" y3="0.97777692" z3="2.34507156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79071218" y3="0.46853849" z3="-4.2865696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77303447" y3="-0.4963158" z3="-4.46228506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42978162" y3="-1.6879115" z3="-5.09149779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14509826" y3="-1.92189396" z3="-5.57192737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83077606" y3="-0.95358854" z3="-5.3701895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03194384" y3="1.39197914" z3="-3.75348378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79065719" y3="-0.34822336" z3="-4.09997554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44552604" y3="-2.73335152" z3="-5.23415224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08187764" y3="-2.8619011" z3="-6.07521265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85158267" y3="-1.14152539" z3="-5.70733877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35482871" y3="-1.87975428" z3="5.04914166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32003787" y3="-3.72063139" z3="3.94693047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22485742" y3="-3.63476444" z3="-6.01487498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44797899" y3="-2.64429309" z3="-4.55406241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07379611" y3="1.16586572" z3="-1.48668257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11551733" y3="1.55095169" z3="-2.46902352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44291483" y3="1.49496559" z3="-1.68195984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85575502" y3="2.15630776" z3="-2.81257949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1670682" y3="1.20070265" z3="-0.9159679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91262219" y3="2.40026676" z3="-2.95415483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57898658" y3="2.21486704" z3="-3.63898616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91091135" y3="2.50894734" z3="-3.80590569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85991855" y3="2.4829497" z3="-4.4165433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24467436" y3="3.01421122" z3="-4.71689533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41431936" y3="3.15162942" z3="-3.34572472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30306972" y3="3.56274017" z3="-4.13943912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22496438" y3="4.16377779" z3="-2.75809767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98226023" y3="5.49588339" z3="-2.99492585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0501488" y3="3.87655489" z3="-2.10456691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62295136" y3="6.25134068" z3="-2.53272207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0858744" y3="4.9480018" z3="-4.37763668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.9102466" y3="5.89770938" z3="-3.82667378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23763146" y3="5.24457707" z3="-5.00240808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73251274" y3="6.96043488" z3="-4.01470004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48549819" y3="-2.20529566" z3="-0.28830711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45768742" y3="-2.99339752" z3="-1.05994445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01112425" y3="-2.59262111" z3="0.59952679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10190622" y3="-1.38340229" z3="-0.69951653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1852803" y3="-1.4273673" z3="-1.14178331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32267587" y3="-0.38441517" z3="-1.48553664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10793112" y3="-1.55256191" z3="-0.93763547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42364954" y3="-2.07917605" z3="-1.99394325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0567,-.1885;7.3849,.1756,.4243;6.647,.4478,-.3366;4.7317,1.2369,-2.2623;4.3894,.4387,-1.1828;2.7322,.8462,-3.6626;3.6393,1.7483,-3.1385;1.3932,2.5898,-4.6297;1.5671,1.2501,-4.3795;.5166,2.9246,-5.1931;2.9241,-.4839,-3.4375;3.0986,.0513,-.9992;2.3986,-1.0927,-1.996;.9274,-.9591,-1.8221;3.0983,-2.4185,-1.8404;-.1467,-3.6213,.6711;-.0212,-5.2363,-4.7514;-.2494,-4.9841,-3.7122;-.8464,-4.3077,-1.0892;.7754,-4.5778,-2.8593;-1.5648,-5.0787,-3.2537;-1.8641,-4.7354,-1.9376;.4886,-4.2539,-1.5315;1.8079,-4.4936,-3.2067;-2.3643,-5.39,-3.9301;-2.8997,-4.7786,-1.5935;-1.0352,-3.8652,.2335;-2.1749,-3.6554,.8805;-3.0626,-4.1186,.4471;-2.1674,-3.5243,2.3479;-2.2197,-3.3497,5.1464;-3.3608,-3.7375,3.0533;-.9997,-3.2293,3.0678;-1.0235,-3.1422,4.4567;-3.3857,-3.6531,4.4426;-4.2754,-3.9807,2.5064;-.041,-3.0895,2.5614;-.0938,-2.9328,4.9939;-4.3206,-3.8325,4.9795;-2.2371,-3.2908,6.2383;1.4077,-3.8908,-.6264;2.1681,-3.3861,-1.077;.5247,.2456,-4.7143;-3.0866,-1.7285,.0292;-2.9087,-.9826,1.1936;-1.8463,-.3348,1.5278;-.3801,.5541,1.2316;-.4659,1.4542,-.3941;.9829,-.6904,1.4086;-.3792,1.7454,2.6778;-3.8816,-.9768,2.0935;-3.6512,-.3675,3.3537;-.2205,.7669,-1.221;.3037,2.2499,-.3893;-1.4491,1.9295,-.5552;1.0153,-1.0555,2.4486;1.9527,-.2209,1.1698;.863,-1.5331,.7083;-.4308,1.2046,3.6394;.5511,2.342,2.6771;-1.2281,2.4503,2.6284;-2.7897,-.8269,3.8639;-4.5659,-.542,3.9356;-3.4785,.7149,3.2369;4.8393,-.6987,.9946;4.4118,-2.0252,.8558;3.7602,-2.6712,1.899;3.5528,-1.9776,3.0877;4.0328,-.686,3.2832;4.6845,-.0536,2.229;4.5162,-2.5233,-.1091;3.3634,-3.6796,1.7757;2.691,-2.5768,4.1117;3.8523,-.176,4.2303;5.0292,.9778,2.3451;-.7907,.4685,-4.2866;-1.773,-.4963,-4.4623;-1.4298,-1.6879,-5.0915;-.1451,-1.9219,-5.5719;.8308,-.9536,-5.3702;-1.0319,1.392,-3.7535;-2.7907,-.3482,-4.1;-2.4455,-2.7334,-5.2342;.0819,-2.8619,-6.0752;1.8516,-1.1415,-5.7073;2.3548,-1.8798,5.0491;2.32,-3.7206,3.9469;-2.2249,-3.6348,-6.0149;-3.448,-2.6443,-4.5541;7.0738,1.1659,-1.4867;6.1155,1.551,-2.469;8.4429,1.495,-1.682;8.8558,2.1563,-2.8126;9.1671,1.2007,-.916;9.9126,2.4003,-2.9542;6.579,2.2149,-3.639;7.9109,2.5089,-3.8059;5.8599,2.4829,-4.4165;8.2447,3.0142,-4.7169;3.4143,3.1516,-3.3457;2.3031,3.5627,-4.1394;4.225,4.1638,-2.7581;3.9823,5.4959,-2.9949;5.0501,3.8766,-2.1046;4.623,6.2513,-2.5327;2.0859,4.948,-4.3776;2.9102,5.8977,-3.8267;1.2376,5.2446,-5.0024;2.7325,6.9604,-4.0147;-4.4855,-2.2053,-.2883;-4.4577,-2.9934,-1.0599;-5.0111,-2.5926,.5995;-5.1019,-1.3834,-.6995;-2.1853,-1.4274,-1.1418;-2.3227,-.3844,-1.4855;-1.1079,-1.5526,-.9376;-2.4236,-2.0792,-1.9939;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411472121</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001870885658 0.000366274441 0.018411922236 0.005342076010</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030597366 -0.000618111 0.000036698 0.000116436 0.000213527 0.000266340 0.000403912 0.000434538 0.000582286 0.000796468 0.000926166 0.001029792 0.001261958 0.001293894 0.001350528 0.001399675 0.001651791 0.001768116 0.001818543 0.001921097 0.002159240 0.002517925 0.002547651 0.002698708 0.002849041 0.003138850 0.003227103 0.003451362 0.003874378 0.003962867 0.004374535 0.004783145 0.004818551 0.005079479 0.005913849 0.006055633 0.006237639 0.006571301 0.006814760 0.007591419 0.008039381 0.008182347 0.009167970 0.009534999 0.009933535 0.010721873 0.011056369 0.011592778 0.011682948 0.012164578 0.012849146 0.013178852 0.013994867 0.014374859 0.015003302 0.015354125 0.015596021 0.016064912 0.016185361 0.016875477 0.017444869 0.017939181 0.019096109 0.019414308 0.019845240 0.020791806 0.021210090 0.021367698 0.022394125 0.023118877 0.025112042 0.025916532 0.026653768 0.026882373 0.027398799 0.029170829 0.029378445 0.031407279 0.033235607 0.033467302 0.033846580 0.035794321 0.036812615 0.037414136 0.039380012 0.039950374 0.040745890 0.042026073 0.042844064 0.044367406 0.045262586 0.046698056 0.047580193 0.049175973 0.050267120 0.050796505 0.051019346 0.051217765 0.052475266 0.052535197 0.052850671 0.052954100 0.054469549 0.054682504 0.055458875 0.056173968 0.056486814 0.056494672 0.057007419 0.058385724 0.060271914 0.060651823 0.061584079 0.062063120 0.063052480 0.064360515 0.065100518 0.065778875 0.066312637 0.067770398 0.068907562 0.070172075 0.072652171 0.074335117 0.074466169 0.076128445 0.077797293 0.083561059 0.085155756 0.086856510 0.087223906 0.087962804 0.090359179 0.090825374 0.092972870 0.094588819 0.095199058 0.096310434 0.097270233 0.097858617 0.098817409 0.099586413 0.100221908 0.102326960 0.102749347 0.103242675 0.103436516 0.103941413 0.105611459 0.106796903 0.107344695 0.109493679 0.110522303 0.111556462 0.112478284 0.112932676 0.114228515 0.115033143 0.116255726 0.118933372 0.120594789 0.121817343 0.122627759 0.124273898 0.125450446 0.126234804 0.126957617 0.131734698 0.134877841 0.135597789 0.142716021 0.143514951 0.146913976 0.147202241 0.149582103 0.152077475 0.154653704 0.155957537 0.156608502 0.161320438 0.161730198 0.173296088 0.173901009 0.179379283 0.183937037 0.185094093 0.189007684 0.190013871 0.193894952 0.193927509 0.198306469 0.200110766 0.205067522 0.206846254 0.207143592 0.209756077 0.212308730 0.215720762 0.217572055 0.217835205 0.220532890 0.224947768 0.226213701 0.231880583 0.234882242 0.235401949 0.235784254 0.244507855 0.255782043 0.257138780 0.263156132 0.269719200 0.280287512 0.282874621 0.286174494 0.291470091 0.296399798 0.304206023 0.305613616 0.307216479 0.313930989 0.316434219 0.317283480 0.321921401 0.329444411 0.332465825 0.351674715 0.351938416 0.354753484 0.355666100 0.359875395 0.362704262 0.363395032 0.384160928 0.386000639 0.391624553 0.410445065 0.425290028 0.429988180 0.458278769 0.468588331 0.477434696 0.482623806 0.483533943 0.487303495 0.490434673 0.509039474 0.515142146 0.535100283 0.566085049 0.572738521 0.592015041 0.593513237 0.606268680 0.607729606 0.644459044 0.646501763 0.648762298 0.674213348 0.677658182 0.684926758 0.691494936 0.693314881 0.699438935 0.704351894 0.717174979 0.741176738 0.751215369 0.758680716 0.767496521 0.772457114 0.778752284 0.810500348 0.812780242 0.818707496 0.821608056 0.822993777 0.831423027 0.832561212 0.835778197 0.840007662 0.845282930 0.846676003 0.848474148 0.858725692 0.865003082 0.865818948 0.873364764 0.881594427 0.884360573 0.889328206 0.892504309 0.900587756 0.903843508 0.922104837 0.923386994 0.933574183 0.935134115 0.965191941 0.975677033 0.985654169 1.000982873 1.017737820 1.027381827 1.041393512 1.050282208 1.057295387 1.068241648 1.086542593 1.088518860 1.103590276 1.106218197 1.112269179 1.120678508 1.124078489 1.135488818 1.143144688 1.174154391 1.175694368 1.180966470 1.186283609 1.190202646 1.196046953 1.223985411 1.227955859 1.274233297 1.301016530 1.318956499 1.328025058 1.332642150 1.334923361 1.335758924 1.341455735 1.342816824 1.344888284 1.358880634 1.378429689 1.382849396 1.384091463 1.414620445 1.419605246 1.435207159 1.551441987 1.679932569 1.775432760</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">191</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33789044" y3="0.06246595" z3="-0.18911152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38215771" y3="0.17921644" z3="0.42582453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64534757" y3="0.45160917" z3="-0.33609662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7332238" y3="1.24058604" z3="-2.26499472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38887831" y3="0.44470205" z3="-1.18464174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73574476" y3="0.84819915" z3="-3.66825412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64262022" y3="1.75078457" z3="-3.14425845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39870787" y3="2.59173785" z3="-4.63978105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57202469" y3="1.25181187" z3="-4.38741719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52282127" y3="2.92642888" z3="-5.20418512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92549956" y3="-0.4812154" z3="-3.43924147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09754182" y3="0.05927261" z3="-1.00211574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39672747" y3="-1.08548441" z3="-1.99732978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92562242" y3="-0.948557" z3="-1.82587144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09377742" y3="-2.41213395" z3="-1.83770446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15000571" y3="-3.62535849" z3="0.67616762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02577321" y3="-5.22888595" z3="-4.74990593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25332653" y3="-4.97946944" z3="-3.71002486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8495961" y3="-4.30874695" z3="-1.08559785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77089005" y3="-4.57028683" z3="-2.85791883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56779819" y3="-5.07973598" z3="-3.25007377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86684858" y3="-4.73929593" z3="-1.93318057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48496829" y3="-4.24979212" z3="-1.52928608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80256848" y3="-4.48174797" z3="-3.20654757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36552224" y3="-5.39457323" z3="-3.92583852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90279155" y3="-4.78507954" z3="-1.58742229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03872529" y3="-3.86789466" z3="0.23765293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17876227" y3="-3.65690254" z3="0.8840793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06653864" y3="-4.1196501" z3="0.45057544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17065647" y3="-3.52766421" z3="2.35181941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22172403" y3="-3.35532662" z3="5.15066627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3640324" y3="-3.74034091" z3="3.05729833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00297732" y3="-3.23390301" z3="3.07169331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02548448" y3="-3.14883134" z3="4.46088791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38907619" y3="-3.65580874" z3="4.44659033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28007559" y3="-3.98084426" z3="2.51018167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04692583" y3="-3.09055692" z3="2.56517714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09607577" y3="-2.93960445" z3="4.99780192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32589065" y3="-3.83149946" z3="4.98345737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23947593" y3="-3.2960084" z3="6.24244369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40382409" y3="-3.88434227" z3="-0.6245619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16295008" y3="-3.37837187" z3="-1.07514158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52915444" y3="0.24772898" z3="-4.71973495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08672965" y3="-1.73054479" z3="0.03314932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91186936" y3="-0.98421564" z3="1.19779693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84943705" y3="-0.33609455" z3="1.53382246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38042573" y3="0.54751697" z3="1.23723096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46730417" y3="1.45503056" z3="-0.38423583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97864099" y3="-0.70238721" z3="1.40380055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37074447" y3="1.73163158" z3="2.6888594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88682676" y3="-0.97820905" z3="2.09553981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65778661" y3="-0.37070598" z3="3.35744812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22614063" y3="0.77011217" z3="-1.21582868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30058574" y3="2.24999429" z3="-0.37682257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45062213" y3="1.93405933" z3="-0.54036094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01463238" y3="-1.06997354" z3="2.442695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94797795" y3="-0.23417436" z3="1.16191208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85438752" y3="-1.54303518" z3="0.70203475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42157337" y3="1.18618337" z3="3.64798574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56208826" y3="2.32460205" z3="2.68840427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21718973" y3="2.44017368" z3="2.6452374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79593821" y3="-0.83047457" z3="3.86759108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5728773" y3="-0.54679873" z3="3.93830501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4865051" y3="0.71196349" z3="3.24256152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83672961" y3="-0.6938695" z3="0.99346839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4138967" y3="-2.02188143" z3="0.85449944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76276932" y3="-2.66968528" z3="1.89696237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5507693" y3="-1.97638669" z3="3.08486597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02575322" y3="-0.68296913" z3="3.28035679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67735211" y3="-0.04881722" z3="2.22720882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51964351" y3="-2.5195239" z3="-0.11144009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36882785" y3="-3.67933623" z3="1.77304769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68937633" y3="-2.57801799" z3="4.10777942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8407788" y3="-0.17303736" z3="4.22610679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01812517" y3="0.98364681" z3="2.34309118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78557562" y3="0.4702216" z3="-4.28849483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76813349" y3="-0.4956922" z3="-4.4643086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42536686" y3="-1.68706425" z3="-5.09188015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14088387" y3="-1.92010027" z3="-5.5743359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83454832" y3="-0.95180934" z3="-5.37856193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02612176" y3="1.39376139" z3="-3.75574109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78506621" y3="-0.34812212" z3="-4.09938346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44087016" y3="-2.73283579" z3="-5.23146063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08519846" y3="-2.86022904" z3="-6.07736259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85473759" y3="-1.13934995" z3="-5.71766768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35110045" y3="-1.8823256" z3="5.04582818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32218067" y3="-3.72254852" z3="3.94299948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22072234" y3="-3.63560632" z3="-6.00991145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44329201" y3="-2.64381421" z3="-4.54993293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07415977" y3="1.16896162" z3="-1.48588338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11747447" y3="1.55356242" z3="-2.46995156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44388559" y3="1.49773392" z3="-1.67926337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85873016" y3="2.15751032" z3="-2.80993015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1667947" y3="1.20386289" z3="-0.91195206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91565249" y3="2.39934804" z3="-2.95057399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5831308" y3="2.21642569" z3="-3.63972376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91550616" y3="2.50972447" z3="-3.80493172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86550017" y3="2.4846269" z3="-4.41846427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25076856" y3="3.01307062" z3="-4.71599261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41852402" y3="3.15415974" z3="-3.35444708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30859862" y3="3.5650246" z3="-4.15022607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22855885" y3="4.16709113" z3="-2.76720376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98696927" y3="5.49896694" z3="-3.00687028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05216369" y3="3.88085744" z3="-2.11127745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62557353" y3="6.25655546" z3="-2.54251801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09292234" y3="4.94978222" z3="-4.39192691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91705282" y3="5.89971773" z3="-3.84177262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2461296" y3="5.24546531" z3="-5.01906393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74083418" y3="6.96189205" z3="-4.03268874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48498426" y3="-2.20663052" z3="-0.28800848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.455635" y3="-2.99408835" z3="-1.06016933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01264869" y3="-2.5949755" z3="0.59790948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10049207" y3="-1.38435477" z3="-0.69967586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18263687" y3="-1.42810366" z3="-1.135638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32233694" y3="-0.38745793" z3="-1.47970439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10677115" y3="-1.55088804" z3="-0.93022495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42371696" y3="-2.07906616" z3="-1.99080463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3379,.0625,-.1891;7.3822,.1792,.4258;6.6453,.4516,-.3361;4.7332,1.2406,-2.265;4.3889,.4447,-1.1846;2.7357,.8482,-3.6683;3.6426,1.7508,-3.1443;1.3987,2.5917,-4.6398;1.572,1.2518,-4.3874;.5228,2.9264,-5.2042;2.9255,-.4812,-3.4392;3.0975,.0593,-1.0021;2.3967,-1.0855,-1.9973;.9256,-.9486,-1.8259;3.0938,-2.4121,-1.8377;-.15,-3.6254,.6762;-.0258,-5.2289,-4.7499;-.2533,-4.9795,-3.71;-.8496,-4.3087,-1.0856;.7709,-4.5703,-2.8579;-1.5678,-5.0797,-3.2501;-1.8668,-4.7393,-1.9332;.485,-4.2498,-1.5293;1.8026,-4.4817,-3.2065;-2.3655,-5.3946,-3.9258;-2.9028,-4.7851,-1.5874;-1.0387,-3.8679,.2377;-2.1788,-3.6569,.8841;-3.0665,-4.1197,.4506;-2.1707,-3.5277,2.3518;-2.2217,-3.3553,5.1507;-3.364,-3.7403,3.0573;-1.003,-3.2339,3.0717;-1.0255,-3.1488,4.4609;-3.3891,-3.6558,4.4466;-4.2801,-3.9808,2.5102;-.0469,-3.0906,2.5652;-.0961,-2.9396,4.9978;-4.3259,-3.8315,4.9835;-2.2395,-3.296,6.2424;1.4038,-3.8843,-.6246;2.163,-3.3784,-1.0751;.5292,.2477,-4.7197;-3.0867,-1.7305,.0331;-2.9119,-.9842,1.1978;-1.8494,-.3361,1.5338;-.3804,.5475,1.2372;-.4673,1.455,-.3842;.9786,-.7024,1.4038;-.3707,1.7316,2.6889;-3.8868,-.9782,2.0955;-3.6578,-.3707,3.3574;-.2261,.7701,-1.2158;.3006,2.25,-.3768;-1.4506,1.9341,-.5404;1.0146,-1.07,2.4427;1.948,-.2342,1.1619;.8544,-1.543,.702;-.4216,1.1862,3.648;.5621,2.3246,2.6884;-1.2172,2.4402,2.6452;-2.7959,-.8305,3.8676;-4.5729,-.5468,3.9383;-3.4865,.712,3.2426;4.8367,-.6939,.9935;4.4139,-2.0219,.8545;3.7628,-2.6697,1.897;3.5508,-1.9764,3.0849;4.0258,-.683,3.2804;4.6774,-.0488,2.2272;4.5196,-2.5195,-.1114;3.3688,-3.6793,1.773;2.6894,-2.578,4.1078;3.8408,-.173,4.2261;5.0181,.9836,2.3431;-.7856,.4702,-4.2885;-1.7681,-.4957,-4.4643;-1.4254,-1.6871,-5.0919;-.1409,-1.9201,-5.5743;.8345,-.9518,-5.3786;-1.0261,1.3938,-3.7557;-2.7851,-.3481,-4.0994;-2.4409,-2.7328,-5.2315;.0852,-2.8602,-6.0774;1.8547,-1.1393,-5.7177;2.3511,-1.8823,5.0458;2.3222,-3.7225,3.943;-2.2207,-3.6356,-6.0099;-3.4433,-2.6438,-4.5499;7.0742,1.169,-1.4859;6.1175,1.5536,-2.47;8.4439,1.4977,-1.6793;8.8587,2.1575,-2.8099;9.1668,1.2039,-.912;9.9157,2.3993,-2.9506;6.5831,2.2164,-3.6397;7.9155,2.5097,-3.8049;5.8655,2.4846,-4.4185;8.2508,3.0131,-4.716;3.4185,3.1542,-3.3544;2.3086,3.565,-4.1502;4.2286,4.1671,-2.7672;3.987,5.499,-3.0069;5.0522,3.8809,-2.1113;4.6256,6.2566,-2.5425;2.0929,4.9498,-4.3919;2.9171,5.8997,-3.8418;1.2461,5.2455,-5.0191;2.7408,6.9619,-4.0327;-4.485,-2.2066,-.288;-4.4556,-2.9941,-1.0602;-5.0126,-2.595,.5979;-5.1005,-1.3844,-.6997;-2.1826,-1.4281,-1.1356;-2.3223,-.3875,-1.4797;-1.1068,-1.5509,-.9302;-2.4237,-2.0791,-1.9908;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650413289111</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001471874176 0.000308303232 0.019524377338 0.005342948880</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030609888 -0.000566506 0.000029492 0.000117294 0.000221510 0.000272967 0.000403918 0.000430829 0.000583086 0.000795055 0.000926088 0.001031484 0.001262591 0.001294054 0.001350222 0.001399706 0.001651795 0.001768970 0.001819348 0.001920515 0.002160246 0.002518061 0.002547187 0.002698982 0.002852462 0.003138358 0.003226856 0.003451573 0.003874879 0.003963169 0.004378634 0.004783229 0.004819024 0.005079436 0.005915286 0.006056017 0.006237487 0.006572772 0.006821541 0.007591842 0.008039731 0.008184483 0.009169047 0.009537502 0.009936924 0.010722099 0.011061384 0.011592805 0.011687951 0.012170807 0.012850299 0.013185677 0.013994860 0.014374808 0.015009735 0.015354252 0.015597826 0.016065632 0.016269270 0.016874690 0.017450220 0.017940170 0.019101382 0.019416255 0.019848175 0.020792034 0.021211263 0.021368810 0.022403416 0.023120363 0.025114740 0.025918315 0.026670861 0.026891438 0.027406621 0.029179171 0.029380796 0.031407590 0.033236093 0.033468234 0.033852436 0.035795256 0.036812612 0.037425734 0.039393542 0.039950904 0.040746261 0.042036241 0.042897640 0.044367150 0.045265014 0.046698484 0.047581227 0.049176955 0.050272422 0.050796582 0.051020129 0.051217834 0.052475848 0.052542059 0.052850844 0.052955471 0.054469608 0.054683605 0.055461088 0.056174738 0.056486923 0.056496498 0.057010982 0.058385792 0.060271933 0.060657520 0.061584521 0.062063084 0.063063715 0.064361891 0.065102022 0.065782604 0.066314106 0.067771116 0.068911438 0.070174137 0.072655458 0.074335197 0.074466098 0.076128881 0.077799486 0.083564986 0.085157584 0.086866425 0.087226262 0.087973309 0.090360506 0.090827910 0.092974095 0.094590587 0.095199179 0.096310603 0.097271040 0.097863490 0.098825509 0.099593143 0.100224274 0.102329942 0.102753866 0.103249192 0.103436657 0.103943488 0.105620406 0.106798640 0.107344848 0.109514134 0.110522305 0.111569824 0.112480103 0.113020611 0.114316234 0.115144156 0.116258113 0.118933179 0.120602405 0.121858025 0.122708477 0.124279585 0.125465184 0.126235165 0.126961502 0.131734704 0.134878611 0.135606424 0.142725807 0.143515794 0.146926800 0.147212198 0.149585919 0.152085332 0.154662412 0.155977727 0.156610995 0.161320997 0.161730082 0.173303436 0.173903123 0.179389282 0.183939285 0.185098966 0.189017360 0.190029992 0.193896054 0.193931881 0.198311444 0.200111609 0.205075148 0.206847715 0.207144522 0.209757712 0.212427929 0.215731394 0.217577940 0.217862134 0.220538116 0.224956409 0.226215298 0.231882711 0.234887958 0.235404737 0.235786285 0.244510126 0.255803426 0.257145115 0.263156458 0.269730870 0.280287723 0.282875715 0.286179156 0.291472157 0.296409382 0.304207039 0.305616046 0.307217485 0.313931726 0.316434496 0.317289366 0.321925775 0.329467172 0.332475497 0.351682997 0.351940684 0.354754950 0.355666049 0.359875613 0.362706749 0.363395180 0.384177024 0.386003787 0.391624974 0.410445896 0.425300059 0.430004418 0.458355557 0.468588528 0.477453340 0.482679279 0.483534065 0.487342335 0.490501581 0.509078378 0.515151424 0.535111338 0.566107429 0.572738972 0.592016530 0.593513374 0.606269369 0.607736428 0.644459109 0.646515903 0.648784369 0.674218707 0.677673664 0.684937168 0.691497541 0.693314721 0.699442627 0.704352543 0.717175294 0.741176828 0.751215428 0.758694692 0.767503028 0.772457118 0.778752932 0.810501037 0.812820018 0.818729568 0.821608641 0.823021001 0.831423191 0.832589375 0.835781786 0.840208416 0.845294968 0.846737410 0.848532049 0.858768178 0.865004554 0.865818994 0.873411615 0.881707496 0.884372347 0.889359359 0.892665534 0.900590291 0.903843715 0.922290038 0.923416267 0.933624911 0.935147220 0.965227186 0.975677751 0.985654201 1.000999827 1.017744278 1.027382581 1.041402206 1.050284242 1.057296550 1.068266559 1.086546093 1.088529974 1.103599216 1.106218415 1.112269192 1.120826650 1.124114439 1.135491508 1.143156661 1.174169574 1.175774015 1.180972972 1.186294164 1.190241815 1.196072439 1.223986835 1.227983346 1.274233803 1.301024189 1.318968795 1.328031262 1.332646730 1.334934524 1.335765835 1.341481769 1.342826337 1.344888480 1.358899411 1.378431660 1.382851258 1.384091656 1.414643634 1.419605677 1.435217483 1.551442045 1.679984378 1.775552083</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">192</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3351419" y3="0.06629133" z3="-0.19087497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37980148" y3="0.17799028" z3="0.42414009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64370797" y3="0.4525462" z3="-0.33764004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73365127" y3="1.24581295" z3="-2.26685821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38722435" y3="0.45042893" z3="-1.18646261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73818925" y3="0.85351195" z3="-3.67206041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64444266" y3="1.75632729" z3="-3.14747074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40369194" y3="2.5955689" z3="-4.6481416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.575616" y3="1.25655562" z3="-4.39347208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52865064" y3="2.92967528" z3="-5.21434384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92786165" y3="-0.47619479" z3="-3.4420427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09512197" y3="0.06620966" z3="-1.00461981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39559725" y3="-1.07918004" z3="-2.00055334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92415908" y3="-0.94161461" z3="-1.83249577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09218615" y3="-2.40583271" z3="-1.83814265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.15090173" y3="-3.62450193" z3="0.68152288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02251952" y3="-5.22825379" z3="-4.7446768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2508817" y3="-4.97869615" z3="-3.70497905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84882403" y3="-4.30910406" z3="-1.08055889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77206296" y3="-4.56509772" z3="-2.85358729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56499175" y3="-5.08326449" z3="-3.24447677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86486958" y3="-4.74337566" z3="-1.92762982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48509099" y3="-4.24467288" z3="-1.52511084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80301497" y3="-4.47210195" z3="-3.20270711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3631623" y3="-5.39967486" z3="-3.9200323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89966087" y3="-4.79500505" z3="-1.58157363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03865872" y3="-3.86954279" z3="0.24308711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17904621" y3="-3.65915089" z3="0.88876477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06664592" y3="-4.12134831" z3="0.45430297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17286028" y3="-3.5287003" z3="2.35625547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22715638" y3="-3.35394437" z3="5.15476479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36739943" y3="-3.73944107" z3="3.06063542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00515422" y3="-3.23680891" z3="3.07724723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0298654" y3="-3.14938148" z3="4.46600726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3931571" y3="-3.6549892" z3="4.44997804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.282363" y3="-3.98034076" z3="2.51302482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0452654" y3="-3.10095316" z3="2.57169864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1000251" y3="-2.94182718" z3="5.00350721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32901875" y3="-3.8323064" z3="4.98600661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24544128" y3="-3.29477925" z3="6.24662763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40268572" y3="-3.87494094" z3="-0.62109198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16244377" y3="-3.36972518" z3="-1.07292192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53238023" y3="0.25169847" z3="-4.7253008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08753305" y3="-1.73197955" z3="0.03489825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91556905" y3="-0.98547038" z3="1.20007852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85728231" y3="-0.3323897" z3="1.53802882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38187157" y3="0.5407575" z3="1.23860615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47060271" y3="1.45625522" z3="-0.37826066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97175231" y3="-0.71638099" z3="1.39415311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35871051" y3="1.71720865" z3="2.69646721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89145498" y3="-0.98278673" z3="2.09696236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66667655" y3="-0.37273121" z3="3.35793083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23008243" y3="0.77587825" z3="-1.21251298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30182645" y3="2.24888072" z3="-0.36836633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45255753" y3="1.93669583" z3="-0.531533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0107481" y3="-1.08802162" z3="2.43161245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94199331" y3="-0.25047415" z3="1.15063545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8421071" y3="-1.5538223" z3="0.68951878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40696793" y3="1.16665899" z3="3.65263131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57677337" y3="2.30568995" z3="2.6946433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20215963" y3="2.42952223" z3="2.66133283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80435955" y3="-0.8280468" z3="3.87012253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58197753" y3="-0.55142349" z3="3.93779199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49839977" y3="0.71047814" z3="3.24170479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83195576" y3="-0.68953036" z3="0.991038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41491592" y3="-2.01947197" z3="0.85284743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76395113" y3="-2.66840024" z3="1.89474785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54667231" y3="-1.97420093" z3="3.08142826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01496509" y3="-0.67807501" z3="3.27587257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66587005" y3="-0.04270939" z3="2.22304467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52689623" y3="-2.51850265" z3="-0.1109128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37508254" y3="-3.67998091" z3="1.77172885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68633522" y3="-2.57806062" z3="4.10395553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82629904" y3="-0.16778672" z3="4.22135233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00182719" y3="0.99154859" z3="2.33812573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.781383" y3="0.47472146" z3="-4.29248625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76371912" y3="-0.49161137" z3="-4.46206829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42203604" y3="-1.6844128" z3="-5.08989071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13927299" y3="-1.91812441" z3="-5.57518262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83665426" y3="-0.94852065" z3="-5.38067151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02069119" y3="1.39908935" z3="-3.76045362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77977725" y3="-0.34364289" z3="-4.0955376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43742218" y3="-2.73124534" z3="-5.22457883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0864603" y3="-2.85913545" z3="-6.07745327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85604747" y3="-1.13630575" z3="-5.72208676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34672143" y3="-1.88363524" z3="5.04216124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32031096" y3="-3.7231987" z3="3.93768819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21974187" y3="-3.63459805" z3="-6.0036553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43679523" y3="-2.6415085" z3="-4.5398534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07424744" y3="1.16852155" z3="-1.48761496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1185435" y3="1.555714" z3="-2.47163378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44477397" y3="1.49258908" z3="-1.68139679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86149043" y3="2.1511477" z3="-2.81221345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16688409" y3="1.19662998" z3="-0.91414009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91943055" y3="2.39078407" z3="-2.95285353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58585137" y3="2.21677234" z3="-3.64157728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91906817" y3="2.50599161" z3="-3.80704087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86883886" y3="2.48656902" z3="-4.42041252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25577172" y3="3.00866471" z3="-4.71815618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42136601" y3="3.15913664" z3="-3.35924735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31290628" y3="3.56909668" z3="-4.15745046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23071922" y3="4.17190133" z3="-2.77110736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98891074" y3="5.50364138" z3="-3.01061018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05367761" y3="3.88553374" z3="-2.11442878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62774642" y3="6.26002653" z3="-2.54687986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09712234" y3="4.95381073" z3="-4.39896092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91974084" y3="5.90415954" z3="-3.84657553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25110294" y3="5.24949082" z3="-5.02710266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74267287" y3="6.96651286" z3="-4.03664465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48441892" y3="-2.21076911" z3="-0.28858897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45177262" y3="-2.99952222" z3="-1.05923974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01408626" y3="-2.59799429" z3="0.59674668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09942402" y3="-1.38990414" z3="-0.70365779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18295454" y3="-1.42885656" z3="-1.13335172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31907702" y3="-0.38588965" z3="-1.47560203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10596043" y3="-1.5552836" z3="-0.92798954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42048332" y3="-2.07887423" z3="-1.98765929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3351,.0663,-.1909;7.3798,.178,.4241;6.6437,.4525,-.3376;4.7337,1.2458,-2.2669;4.3872,.4504,-1.1865;2.7382,.8535,-3.6721;3.6444,1.7563,-3.1475;1.4037,2.5956,-4.6481;1.5756,1.2566,-4.3935;.5287,2.9297,-5.2143;2.9279,-.4762,-3.442;3.0951,.0662,-1.0046;2.3956,-1.0792,-2.0006;.9242,-.9416,-1.8325;3.0922,-2.4058,-1.8381;-.1509,-3.6245,.6815;-.0225,-5.2283,-4.7447;-.2509,-4.9787,-3.705;-.8488,-4.3091,-1.0806;.7721,-4.5651,-2.8536;-1.565,-5.0833,-3.2445;-1.8649,-4.7434,-1.9276;.4851,-4.2447,-1.5251;1.803,-4.4721,-3.2027;-2.3632,-5.3997,-3.92;-2.8997,-4.795,-1.5816;-1.0387,-3.8695,.2431;-2.179,-3.6592,.8888;-3.0666,-4.1213,.4543;-2.1729,-3.5287,2.3563;-2.2272,-3.3539,5.1548;-3.3674,-3.7394,3.0606;-1.0052,-3.2368,3.0772;-1.0299,-3.1494,4.466;-3.3932,-3.655,4.45;-4.2824,-3.9803,2.513;-.0453,-3.101,2.5717;-.1,-2.9418,5.0035;-4.329,-3.8323,4.986;-2.2454,-3.2948,6.2466;1.4027,-3.8749,-.6211;2.1624,-3.3697,-1.0729;.5324,.2517,-4.7253;-3.0875,-1.732,.0349;-2.9156,-.9855,1.2001;-1.8573,-.3324,1.538;-.3819,.5408,1.2386;-.4706,1.4563,-.3783;.9718,-.7164,1.3942;-.3587,1.7172,2.6965;-3.8915,-.9828,2.097;-3.6667,-.3727,3.3579;-.2301,.7759,-1.2125;.3018,2.2489,-.3684;-1.4526,1.9367,-.5315;1.0107,-1.088,2.4316;1.942,-.2505,1.1506;.8421,-1.5538,.6895;-.407,1.1667,3.6526;.5768,2.3057,2.6946;-1.2022,2.4295,2.6613;-2.8044,-.828,3.8701;-4.582,-.5514,3.9378;-3.4984,.7105,3.2417;4.832,-.6895,.991;4.4149,-2.0195,.8528;3.764,-2.6684,1.8947;3.5467,-1.9742,3.0814;4.015,-.6781,3.2759;4.6659,-.0427,2.223;4.5269,-2.5185,-.1109;3.3751,-3.68,1.7717;2.6863,-2.5781,4.104;3.8263,-.1678,4.2214;5.0018,.9915,2.3381;-.7814,.4747,-4.2925;-1.7637,-.4916,-4.4621;-1.422,-1.6844,-5.0899;-.1393,-1.9181,-5.5752;.8367,-.9485,-5.3807;-1.0207,1.3991,-3.7605;-2.7798,-.3436,-4.0955;-2.4374,-2.7312,-5.2246;.0865,-2.8591,-6.0775;1.856,-1.1363,-5.7221;2.3467,-1.8836,5.0422;2.3203,-3.7232,3.9377;-2.2197,-3.6346,-6.0037;-3.4368,-2.6415,-4.5399;7.0742,1.1685,-1.4876;6.1185,1.5557,-2.4716;8.4448,1.4926,-1.6814;8.8615,2.1511,-2.8122;9.1669,1.1966,-.9141;9.9194,2.3908,-2.9529;6.5859,2.2168,-3.6416;7.9191,2.506,-3.807;5.8688,2.4866,-4.4204;8.2558,3.0087,-4.7182;3.4214,3.1591,-3.3592;2.3129,3.5691,-4.1575;4.2307,4.1719,-2.7711;3.9889,5.5036,-3.0106;5.0537,3.8855,-2.1144;4.6277,6.26,-2.5469;2.0971,4.9538,-4.399;2.9197,5.9042,-3.8466;1.2511,5.2495,-5.0271;2.7427,6.9665,-4.0366;-4.4844,-2.2108,-.2886;-4.4518,-2.9995,-1.0592;-5.0141,-2.598,.5967;-5.0994,-1.3899,-.7037;-2.183,-1.4289,-1.1334;-2.3191,-.3859,-1.4756;-1.106,-1.5553,-.928;-2.4205,-2.0789,-1.9877;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650413397425</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001331877434 0.000287182507 0.019115129333 0.005352071143</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030617124 -0.000290685 0.000021560 0.000122329 0.000194090 0.000249580 0.000404106 0.000430752 0.000582658 0.000794644 0.000926929 0.001030916 0.001262850 0.001296384 0.001350790 0.001399983 0.001655590 0.001772807 0.001819191 0.001922477 0.002160169 0.002519067 0.002547324 0.002698904 0.002851819 0.003138670 0.003226698 0.003452056 0.003876251 0.003963265 0.004381565 0.004783259 0.004823618 0.005081426 0.005919603 0.006058937 0.006237244 0.006578629 0.006824511 0.007591418 0.008039895 0.008186270 0.009172861 0.009539339 0.009941594 0.010721669 0.011062982 0.011592727 0.011687483 0.012171429 0.012852418 0.013190404 0.013994996 0.014374843 0.015014383 0.015354990 0.015599741 0.016065678 0.016354528 0.016876507 0.017451669 0.017941881 0.019103463 0.019418386 0.019849021 0.020792030 0.021212049 0.021368669 0.022411950 0.023121144 0.025118373 0.025920366 0.026689608 0.026900969 0.027411489 0.029183655 0.029383031 0.031407875 0.033236558 0.033471594 0.033857629 0.035795212 0.036812811 0.037435414 0.039413148 0.039953450 0.040749147 0.042041413 0.042942459 0.044367814 0.045264706 0.046698713 0.047581723 0.049177668 0.050282002 0.050796618 0.051020458 0.051217793 0.052476360 0.052549959 0.052851128 0.052955714 0.054469660 0.054684267 0.055462865 0.056174981 0.056486943 0.056497510 0.057014628 0.058386507 0.060272238 0.060666773 0.061585157 0.062063156 0.063076869 0.064365493 0.065102846 0.065787924 0.066317253 0.067773190 0.068914378 0.070175847 0.072657698 0.074335244 0.074466120 0.076130107 0.077803937 0.083569085 0.085158977 0.086874804 0.087228289 0.087977582 0.090361266 0.090830503 0.092975233 0.094591519 0.095200568 0.096311093 0.097272283 0.097869423 0.098837408 0.099603626 0.100225189 0.102333212 0.102758512 0.103252226 0.103436917 0.103946991 0.105632166 0.106800733 0.107345661 0.109524621 0.110522451 0.111574704 0.112481101 0.113070363 0.114378980 0.115262176 0.116260249 0.118935551 0.120610725 0.121877375 0.122761198 0.124287745 0.125478521 0.126235368 0.126961747 0.131735363 0.134879665 0.135613441 0.142729416 0.143516959 0.146937768 0.147225564 0.149590466 0.152089500 0.154666004 0.155991013 0.156620065 0.161321822 0.161730120 0.173307045 0.173903573 0.179398650 0.183942134 0.185102576 0.189027927 0.190050400 0.193896512 0.193935431 0.198317493 0.200114654 0.205078167 0.206848419 0.207146030 0.209761185 0.212512989 0.215737676 0.217579274 0.217871882 0.220541749 0.224965189 0.226216786 0.231888104 0.234892649 0.235407130 0.235787426 0.244512430 0.255820339 0.257150842 0.263160644 0.269742280 0.280288505 0.282876339 0.286181232 0.291474306 0.296412746 0.304207220 0.305617392 0.307218307 0.313932470 0.316434723 0.317293968 0.321933626 0.329478102 0.332483294 0.351691281 0.351941283 0.354756624 0.355666235 0.359875770 0.362712797 0.363397089 0.384199020 0.386013846 0.391625513 0.410447743 0.425316174 0.430033778 0.458426318 0.468588848 0.477462512 0.482729135 0.483535744 0.487381064 0.490566421 0.509106333 0.515156850 0.535122051 0.566132799 0.572738961 0.592019510 0.593513622 0.606270014 0.607745238 0.644461930 0.646531114 0.648807328 0.674225472 0.677685067 0.684953893 0.691500676 0.693315156 0.699444017 0.704352551 0.717175583 0.741177024 0.751215431 0.758702397 0.767510879 0.772457312 0.778753403 0.810502802 0.812882948 0.818756037 0.821609457 0.823031431 0.831425294 0.832632012 0.835784956 0.840376098 0.845306507 0.846783756 0.848573583 0.858800239 0.865008910 0.865819009 0.873448749 0.881807242 0.884385755 0.889389977 0.892819734 0.900594999 0.903845854 0.922447643 0.923454338 0.933654086 0.935161734 0.965276909 0.975679152 0.985654459 1.001014435 1.017744400 1.027384362 1.041409803 1.050290312 1.057297898 1.068292331 1.086549623 1.088544418 1.103602830 1.106218555 1.112269324 1.120923730 1.124137482 1.135492993 1.143168374 1.174181443 1.175850928 1.180977766 1.186299213 1.190284459 1.196088720 1.223987152 1.228014474 1.274239757 1.301037748 1.318994667 1.328035691 1.332650580 1.334953500 1.335787156 1.341508717 1.342831547 1.344889729 1.358916468 1.378437969 1.382851392 1.384091847 1.414645210 1.419605859 1.435226176 1.551442420 1.680013180 1.775602451</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">193</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33357012" y3="0.06855233" z3="-0.19356234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37915824" y3="0.1736025" z3="0.41982811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64330919" y3="0.45012029" z3="-0.34156127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73449295" y3="1.24787303" z3="-2.27014891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38632523" y3="0.45465631" z3="-1.18901237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73967383" y3="0.85655876" z3="-3.67628933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64640606" y3="1.75890982" z3="-3.15192132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40498028" y3="2.60051917" z3="-4.65044217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57737539" y3="1.26043119" z3="-4.3976182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52961357" y3="2.93545769" z3="-5.21550877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92752474" y3="-0.47260645" z3="-3.44421411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09344806" y3="0.07337358" z3="-1.00748319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39472102" y3="-1.07350446" z3="-2.00221433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92319414" y3="-0.93595078" z3="-1.83586383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09179528" y3="-2.39949884" z3="-1.83689901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14830819" y3="-3.62707188" z3="0.68754409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01648118" y3="-5.22423245" z3="-4.74174619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24502338" y3="-4.97655347" z3="-3.70165367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84367761" y3="-4.31104244" z3="-1.07639138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77739785" y3="-4.56163499" z3="-2.84984545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55856794" y3="-5.0852645" z3="-3.24107766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85869335" y3="-4.74757939" z3="-1.92376295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49019301" y3="-4.24327436" z3="-1.52091342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80825153" y3="-4.46593382" z3="-3.19886868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35513914" y3="-5.40391196" z3="-3.9168122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89393561" y3="-4.80099488" z3="-1.57733318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03548744" y3="-3.87204787" z3="0.24724929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17716383" y3="-3.66167634" z3="0.8909779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0638391" y3="-4.12439633" z3="0.45523408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17349911" y3="-3.53097472" z3="2.35848736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2334329" y3="-3.3534016" z3="5.15683168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36968046" y3="-3.74014528" z3="3.06057769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00737213" y3="-3.23933243" z3="3.08166871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03436169" y3="-3.15103456" z3="4.47048877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39900114" y3="-3.65320943" z3="4.44960009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28438743" y3="-3.97974382" z3="2.51106005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04905339" y3="-3.1007083" z3="2.57825842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1058774" y3="-2.94273046" z3="5.00938563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33787074" y3="-3.82632578" z3="4.98381827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25485084" y3="-3.29171676" z3="6.24838271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40742619" y3="-3.87165035" z3="-0.61701597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16444284" y3="-3.36369103" z3="-1.06905391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53326381" y3="0.25671411" z3="-4.72703056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0855289" y3="-1.7356213" z3="0.03550388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91849253" y3="-0.98693229" z3="1.19975563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86236402" y3="-0.33013098" z3="1.53946566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38290646" y3="0.53547348" z3="1.23937767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47166148" y3="1.45783734" z3="-0.37365072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96606057" y3="-0.72734993" z3="1.38504519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34766323" y3="1.70450171" z3="2.7026361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8971013" y3="-0.98480844" z3="2.09344279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67661409" y3="-0.37377501" z3="3.35493084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23521087" y3="0.77934925" z3="-1.21185934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29958367" y3="2.24954742" z3="-0.36188859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45352396" y3="1.9421087" z3="-0.52270895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00663378" y3="-1.10322724" z3="2.42072847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93636487" y3="-0.26214978" z3="1.14129406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83333842" y3="-1.56089487" z3="0.67674558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39613914" y3="1.14892561" z3="3.65614955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59211489" y3="2.28657482" z3="2.70027562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18645015" y3="2.42311114" z3="2.67452131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81411146" y3="-0.82782913" z3="3.86902205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59298451" y3="-0.5545276" z3="3.93225519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51115241" y3="0.70988048" z3="3.23894678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82894041" y3="-0.6857443" z3="0.98897629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41800661" y3="-2.01784405" z3="0.85385407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.766359" y3="-2.66616454" z3="1.89577429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54199016" y3="-1.96908385" z3="3.07913679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0037416" y3="-0.67017762" z3="3.27070342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6555786" y3="-0.03547342" z3="2.218171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53441067" y3="-2.51919269" z3="-0.10866574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38188141" y3="-3.67972262" z3="1.77474325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68087415" y3="-2.573243" z3="4.1008456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.80855316" y3="-0.15730466" z3="4.21284863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.98652978" y3="1.00065896" z3="2.33084325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78001894" y3="0.48047749" z3="-4.29234132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76269033" y3="-0.48655037" z3="-4.45940264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42192034" y3="-1.68054367" z3="-5.08320491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13966014" y3="-1.9144947" z3="-5.57123281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83624121" y3="-0.94483078" z3="-5.3826587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.01870097" y3="1.40592836" z3="-3.76171358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.77802491" y3="-0.33808863" z3="-4.09038138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4367205" y3="-2.72847298" z3="-5.21341119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08467379" y3="-2.85663077" z3="-6.0711503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85495556" y3="-1.13324875" z3="-5.72551952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34015505" y3="-1.87890486" z3="5.03871747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3161886" y3="-3.71863787" z3="3.93507177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22125014" y3="-3.63227952" z3="-5.99228467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43379389" y3="-2.64015689" z3="-4.52423606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07542778" y3="1.16458757" z3="-1.49197474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12014156" y3="1.55489225" z3="-2.47519676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44714195" y3="1.48382481" z3="-1.68731514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86502213" y3="2.14051772" z3="-2.81871702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16908131" y3="1.18465447" z3="-0.9211386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92355543" y3="2.37441068" z3="-2.96116715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58865844" y3="2.2158536" z3="-3.64507855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92282939" y3="2.50004404" z3="-3.81207647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87175251" y3="2.48928732" z3="-4.42268801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26036944" y3="3.00199335" z3="-4.72332522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42346593" y3="3.16222548" z3="-3.36281235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31430478" y3="3.5735003" z3="-4.15941643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23296804" y3="4.17455762" z3="-2.77395101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98992603" y3="5.50670257" z3="-3.01069401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05669142" y3="3.88747496" z3="-2.11846117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62746375" y3="6.26377158" z3="-2.54450457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09763092" y3="4.95856281" z3="-4.39859927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91993308" y3="5.90814916" z3="-3.84517114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25109937" y3="5.25481033" z3="-5.025815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74211654" y3="6.97058606" z3="-4.03315972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48107383" y3="-2.216936" z3="-0.29076327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44583964" y3="-3.00561325" z3="-1.06153387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0112511" y3="-2.60515077" z3="0.59372757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09763788" y3="-1.39747414" z3="-0.70671682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17875312" y3="-1.43121236" z3="-1.13061193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31636873" y3="-0.38932366" z3="-1.47281948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10367535" y3="-1.55478769" z3="-0.92362598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41766741" y3="-2.08050897" z3="-1.98705337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3336,.0686,-.1936;7.3792,.1736,.4198;6.6433,.4501,-.3416;4.7345,1.2479,-2.2701;4.3863,.4547,-1.189;2.7397,.8566,-3.6763;3.6464,1.7589,-3.1519;1.405,2.6005,-4.6504;1.5774,1.2604,-4.3976;.5296,2.9355,-5.2155;2.9275,-.4726,-3.4442;3.0934,.0734,-1.0075;2.3947,-1.0735,-2.0022;.9232,-.936,-1.8359;3.0918,-2.3995,-1.8369;-.1483,-3.6271,.6875;-.0165,-5.2242,-4.7417;-.245,-4.9766,-3.7017;-.8437,-4.311,-1.0764;.7774,-4.5616,-2.8498;-1.5586,-5.0853,-3.2411;-1.8587,-4.7476,-1.9238;.4902,-4.2433,-1.5209;1.8083,-4.4659,-3.1989;-2.3551,-5.4039,-3.9168;-2.8939,-4.801,-1.5773;-1.0355,-3.872,.2472;-2.1772,-3.6617,.891;-3.0638,-4.1244,.4552;-2.1735,-3.531,2.3585;-2.2334,-3.3534,5.1568;-3.3697,-3.7401,3.0606;-1.0074,-3.2393,3.0817;-1.0344,-3.151,4.4705;-3.399,-3.6532,4.4496;-4.2844,-3.9797,2.5111;-.0491,-3.1007,2.5783;-.1059,-2.9427,5.0094;-4.3379,-3.8263,4.9838;-2.2549,-3.2917,6.2484;1.4074,-3.8717,-.617;2.1644,-3.3637,-1.0691;.5333,.2567,-4.727;-3.0855,-1.7356,.0355;-2.9185,-.9869,1.1998;-1.8624,-.3301,1.5395;-.3829,.5355,1.2394;-.4717,1.4578,-.3737;.9661,-.7273,1.385;-.3477,1.7045,2.7026;-3.8971,-.9848,2.0934;-3.6766,-.3738,3.3549;-.2352,.7793,-1.2119;.2996,2.2495,-.3619;-1.4535,1.9421,-.5227;1.0066,-1.1032,2.4207;1.9364,-.2621,1.1413;.8333,-1.5609,.6767;-.3961,1.1489,3.6561;.5921,2.2866,2.7003;-1.1865,2.4231,2.6745;-2.8141,-.8278,3.869;-4.593,-.5545,3.9323;-3.5112,.7099,3.2389;4.8289,-.6857,.989;4.418,-2.0178,.8539;3.7664,-2.6662,1.8958;3.542,-1.9691,3.0791;4.0037,-.6702,3.2707;4.6556,-.0355,2.2182;4.5344,-2.5192,-.1087;3.3819,-3.6797,1.7747;2.6809,-2.5732,4.1008;3.8086,-.1573,4.2128;4.9865,1.0007,2.3308;-.78,.4805,-4.2923;-1.7627,-.4866,-4.4594;-1.4219,-1.6805,-5.0832;-.1397,-1.9145,-5.5712;.8362,-.9448,-5.3827;-1.0187,1.4059,-3.7617;-2.778,-.3381,-4.0904;-2.4367,-2.7285,-5.2134;.0847,-2.8566,-6.0712;1.855,-1.1332,-5.7255;2.3402,-1.8789,5.0387;2.3162,-3.7186,3.9351;-2.2213,-3.6323,-5.9923;-3.4338,-2.6402,-4.5242;7.0754,1.1646,-1.492;6.1201,1.5549,-2.4752;8.4471,1.4838,-1.6873;8.865,2.1405,-2.8187;9.1691,1.1847,-.9211;9.9236,2.3744,-2.9612;6.5887,2.2159,-3.6451;7.9228,2.5,-3.8121;5.8718,2.4893,-4.4227;8.2604,3.002,-4.7233;3.4235,3.1622,-3.3628;2.3143,3.5735,-4.1594;4.233,4.1746,-2.774;3.9899,5.5067,-3.0107;5.0567,3.8875,-2.1185;4.6275,6.2638,-2.5445;2.0976,4.9586,-4.3986;2.9199,5.9081,-3.8452;1.2511,5.2548,-5.0258;2.7421,6.9706,-4.0332;-4.4811,-2.2169,-.2908;-4.4458,-3.0056,-1.0615;-5.0113,-2.6052,.5937;-5.0976,-1.3975,-.7067;-2.1788,-1.4312,-1.1306;-2.3164,-.3893,-1.4728;-1.1037,-1.5548,-.9236;-2.4177,-2.0805,-1.9871;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650408953492</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001295286559 0.000261924124 0.020662437833 0.005369627451</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030619361 -0.000236774 0.000010577 0.000136854 0.000180877 0.000254275 0.000404592 0.000436381 0.000583120 0.000795256 0.000926976 0.001030394 0.001267193 0.001299160 0.001350572 0.001403841 0.001654727 0.001772895 0.001820222 0.001921569 0.002160292 0.002519927 0.002548201 0.002699703 0.002851895 0.003139255 0.003226551 0.003452004 0.003874626 0.003963276 0.004386093 0.004783364 0.004826277 0.005080886 0.005921377 0.006061367 0.006240699 0.006580795 0.006828602 0.007591106 0.008040934 0.008186043 0.009175435 0.009539902 0.009943442 0.010722247 0.011063823 0.011592854 0.011688269 0.012173513 0.012857036 0.013189410 0.013997326 0.014375646 0.015017850 0.015355624 0.015600120 0.016065690 0.016419668 0.016877810 0.017452097 0.017942223 0.019103420 0.019420344 0.019849559 0.020792830 0.021212543 0.021368197 0.022421198 0.023122049 0.025120375 0.025924060 0.026694774 0.026911638 0.027415564 0.029186626 0.029384895 0.031408194 0.033238319 0.033476221 0.033860117 0.035796735 0.036812650 0.037445505 0.039425008 0.039955050 0.040752059 0.042046395 0.042993956 0.044370349 0.045264691 0.046698691 0.047581786 0.049178437 0.050283647 0.050797121 0.051020879 0.051217771 0.052476806 0.052557234 0.052851526 0.052955798 0.054470888 0.054686426 0.055464399 0.056175206 0.056487447 0.056497724 0.057016909 0.058386490 0.060272763 0.060670832 0.061585854 0.062063619 0.063082333 0.064367772 0.065103615 0.065788249 0.066322115 0.067775322 0.068914717 0.070176518 0.072658914 0.074336026 0.074466156 0.076131795 0.077807332 0.083574111 0.085159684 0.086879863 0.087233703 0.087977433 0.090362011 0.090834780 0.092976204 0.094592246 0.095205541 0.096312663 0.097272992 0.097871405 0.098848860 0.099623195 0.100225953 0.102336884 0.102760686 0.103258889 0.103436944 0.103946447 0.105640754 0.106800829 0.107347298 0.109527600 0.110524167 0.111577755 0.112481114 0.113102213 0.114436869 0.115376752 0.116260692 0.118943648 0.120622195 0.121885028 0.122796145 0.124297724 0.125486236 0.126237325 0.126962757 0.131737449 0.134879689 0.135615023 0.142729512 0.143516896 0.146940444 0.147239047 0.149591460 0.152093885 0.154672366 0.155998233 0.156627289 0.161323945 0.161731415 0.173307215 0.173903594 0.179404655 0.183944460 0.185103220 0.189039754 0.190059170 0.193898819 0.193935683 0.198324911 0.200115730 0.205079127 0.206851530 0.207145923 0.209764772 0.212555366 0.215737272 0.217579861 0.217872414 0.220547144 0.224978379 0.226218929 0.231898751 0.234897634 0.235409746 0.235787607 0.244514897 0.255827109 0.257154495 0.263171805 0.269752150 0.280289052 0.282876912 0.286182587 0.291474977 0.296412931 0.304207322 0.305617380 0.307218659 0.313932556 0.316434739 0.317298269 0.321939991 0.329482116 0.332488202 0.351691351 0.351942681 0.354761708 0.355666209 0.359877123 0.362719263 0.363398255 0.384220412 0.386017339 0.391626136 0.410448163 0.425334748 0.430078126 0.458491774 0.468590431 0.477474862 0.482762632 0.483537442 0.487399170 0.490636865 0.509123052 0.515158675 0.535127578 0.566147188 0.572739998 0.592020571 0.593514781 0.606270724 0.607766008 0.644463650 0.646546357 0.648829419 0.674232678 0.677693543 0.684970146 0.691505971 0.693315094 0.699450927 0.704352901 0.717175586 0.741177189 0.751215482 0.758704213 0.767510974 0.772457316 0.778753704 0.810502862 0.812927981 0.818758709 0.821610564 0.823071339 0.831427764 0.832673950 0.835786415 0.840519106 0.845319329 0.846801814 0.848598821 0.858814153 0.865029559 0.865819042 0.873470060 0.881873250 0.884397580 0.889401153 0.892959729 0.900597316 0.903848265 0.922542747 0.923483227 0.933666439 0.935172181 0.965325004 0.975682146 0.985654488 1.001021659 1.017745180 1.027385505 1.041413703 1.050304697 1.057297895 1.068324206 1.086551158 1.088552293 1.103602970 1.106218586 1.112269609 1.120963797 1.124144966 1.135493261 1.143175598 1.174187262 1.175924756 1.180981174 1.186300566 1.190337368 1.196096153 1.223996317 1.228029324 1.274240911 1.301069455 1.319033320 1.328053303 1.332651168 1.334976719 1.335794186 1.341535438 1.342831528 1.344889674 1.358916551 1.378439868 1.382851567 1.384092282 1.414645767 1.419607955 1.435249947 1.551445164 1.680013946 1.775623517</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">194</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33580602" y3="0.06418418" z3="-0.19195325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38122675" y3="0.1736296" z3="0.42098174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64460961" y3="0.44887296" z3="-0.34008637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73344318" y3="1.24420498" z3="-2.26729291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38741798" y3="0.44904444" z3="-1.18684399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73697879" y3="0.85307674" z3="-3.67142666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64369714" y3="1.75539883" z3="-3.14688661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40050168" y3="2.59685507" z3="-4.64267944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57359988" y3="1.25695694" z3="-4.39105256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52463204" y3="2.93178736" z3="-5.20701798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92654987" y3="-0.4764912" z3="-3.44206518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.095294" y3="0.06547869" z3="-1.00470124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39613973" y3="-1.08026875" z3="-2.0003463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92472221" y3="-0.94397976" z3="-1.83138571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09403096" y3="-2.40624131" z3="-1.83850396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14794418" y3="-3.62469707" z3="0.68167964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01807435" y3="-5.2297988" z3="-4.7445833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24658166" y3="-4.98016624" z3="-3.70494452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84494023" y3="-4.30982903" z3="-1.08079276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77642512" y3="-4.56756992" z3="-2.85297054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56082845" y3="-5.08387846" z3="-3.24504582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86085901" y3="-4.74365683" z3="-1.92834703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48932404" y3="-4.24690733" z3="-1.52458727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80777863" y3="-4.47581666" z3="-3.20149983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35828408" y3="-5.40048608" z3="-3.92084519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8962887" y3="-4.79341251" z3="-1.58271673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03562872" y3="-3.86932142" z3="0.24245054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17657164" y3="-3.658993" z3="0.8873556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06363067" y3="-4.12194521" z3="0.45259426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17137204" y3="-3.52800309" z3="2.3548285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2282113" y3="-3.3512174" z3="5.15323798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36647234" y3="-3.73856921" z3="3.05825714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00462697" y3="-3.23504364" z3="3.07667657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03027743" y3="-3.14708834" z3="4.46551146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39399611" y3="-3.65239111" z3="4.44740302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28126383" y3="-3.97950496" z3="2.50981775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04606317" y3="-3.09640625" z3="2.57199299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10130809" y3="-2.93841206" z3="5.00371236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33136074" y3="-3.82774429" z3="4.98266266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2479934" y3="-3.29046506" z3="6.24492516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40716087" y3="-3.87785028" z3="-0.62035919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16557924" y3="-3.3714117" z3="-1.07208501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.53024843" y3="0.25278675" z3="-4.72265485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08579656" y3="-1.73284468" z3="0.03301824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91504055" y3="-0.98497481" z3="1.19731304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8566613" y3="-0.33130869" z3="1.53500316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38172464" y3="0.54226944" z3="1.23619707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46917716" y3="1.45649788" z3="-0.38144885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97200059" y3="-0.71428405" z3="1.39337442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35906418" y3="1.71956482" z3="2.69306854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89165233" y3="-0.98146507" z3="2.0932727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66756965" y3="-0.37088133" z3="3.35428657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22939892" y3="0.77481134" z3="-1.21556109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30151074" y3="2.24959699" z3="-0.37195772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45147525" y3="1.93752219" z3="-0.53498729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00976354" y3="-1.08583496" z3="2.43078434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94215595" y3="-0.24791215" z3="1.1509132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84360357" y3="-1.55149927" z3="0.68845814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40860343" y3="1.16958804" z3="3.64960614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57715496" y3="2.30706632" z3="2.69131125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20166259" y3="2.43294162" z3="2.65695317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80505193" y3="-0.82615996" z3="3.86685351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58307715" y3="-0.5497882" z3="3.9336356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50011487" y3="0.71237365" z3="3.23785222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83268187" y3="-0.69070296" z3="0.99071087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4157109" y3="-2.02076239" z3="0.85403123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76409783" y3="-2.66837191" z3="1.89635805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54599288" y3="-1.97274175" z3="3.08184615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01431754" y3="-0.67648633" z3="3.27494913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66601252" y3="-0.04246318" z3="2.22184534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52759164" y3="-2.52074634" z3="-0.10957588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37503079" y3="-3.68002902" z3="1.77428742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68494741" y3="-2.57530907" z3="4.10452693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82452143" y3="-0.1648568" z3="4.219065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00185847" y3="0.99191231" z3="2.33577208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78385045" y3="0.47602986" z3="-4.29039807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76623327" y3="-0.4905328" z3="-4.46083484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42420094" y3="-1.68363668" z3="-5.08652273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14097053" y3="-1.91730819" z3="-5.57144856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83465908" y3="-0.94788293" z3="-5.37858334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0236005" y3="1.40072257" z3="-3.75908268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78243035" y3="-0.34239661" z3="-4.09437016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4390719" y3="-2.73091201" z3="-5.22066047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08464638" y3="-2.85869016" z3="-6.07257136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85417743" y3="-1.1359014" z3="-5.71936358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34620557" y3="-1.88025752" z3="5.04261927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31808048" y3="-3.72009629" z3="3.93902854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22159546" y3="-3.63393748" z3="-5.99991616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4380434" y3="-2.64255075" z3="-4.53457095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07477398" y3="1.16478049" z3="-1.49030202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11836506" y3="1.55355898" z3="-2.47302304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44557652" y3="1.48738848" z3="-1.68568633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8616423" y3="2.14589091" z3="-2.81672122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16835611" y3="1.18978345" z3="-0.91969978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91959905" y3="2.38320021" z3="-2.95894454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58499399" y3="2.21560226" z3="-3.64284861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91840205" y3="2.50317621" z3="-3.80989429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86727592" y3="2.48731201" z3="-4.4203357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25454587" y3="3.00612189" z3="-4.72103096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41980714" y3="3.15866716" z3="-3.35608273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3098047" y3="3.56989214" z3="-4.1515059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2295331" y3="4.17082151" z3="-2.7672646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98629222" y3="5.50296824" z3="-3.00341996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05380371" y3="3.88361535" z3="-2.11256267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62465089" y3="6.25952436" z3="-2.53813806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09267856" y3="4.95500589" z3="-4.38978283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91548252" y3="5.904576" z3="-3.83676701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2454802" y3="5.25142361" z3="-5.01600182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73744536" y3="6.96711711" z3="-4.02428063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4823903" y3="-2.21254861" z3="-0.29053945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44942607" y3="-3.00139459" z3="-1.06116485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01154968" y3="-2.60005573" z3="0.59490334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09841644" y3="-1.39231004" z3="-0.70554872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18069011" y3="-1.42970723" z3="-1.13470355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31825906" y3="-0.38775327" z3="-1.47762536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10465286" y3="-1.55415115" z3="-0.92882534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41970473" y3="-2.07991999" z3="-1.98974335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3358,.0642,-.192;7.3812,.1736,.421;6.6446,.4489,-.3401;4.7334,1.2442,-2.2673;4.3874,.449,-1.1868;2.737,.8531,-3.6714;3.6437,1.7554,-3.1469;1.4005,2.5969,-4.6427;1.5736,1.257,-4.3911;.5246,2.9318,-5.207;2.9265,-.4765,-3.4421;3.0953,.0655,-1.0047;2.3961,-1.0803,-2.0003;.9247,-.944,-1.8314;3.094,-2.4062,-1.8385;-.1479,-3.6247,.6817;-.0181,-5.2298,-4.7446;-.2466,-4.9802,-3.7049;-.8449,-4.3098,-1.0808;.7764,-4.5676,-2.853;-1.5608,-5.0839,-3.245;-1.8609,-4.7437,-1.9283;.4893,-4.2469,-1.5246;1.8078,-4.4758,-3.2015;-2.3583,-5.4005,-3.9208;-2.8963,-4.7934,-1.5827;-1.0356,-3.8693,.2425;-2.1766,-3.659,.8874;-3.0636,-4.1219,.4526;-2.1714,-3.528,2.3548;-2.2282,-3.3512,5.1532;-3.3665,-3.7386,3.0583;-1.0046,-3.235,3.0767;-1.0303,-3.1471,4.4655;-3.394,-3.6524,4.4474;-4.2813,-3.9795,2.5098;-.0461,-3.0964,2.572;-.1013,-2.9384,5.0037;-4.3314,-3.8277,4.9827;-2.248,-3.2905,6.2449;1.4072,-3.8779,-.6204;2.1656,-3.3714,-1.0721;.5302,.2528,-4.7227;-3.0858,-1.7328,.033;-2.915,-.985,1.1973;-1.8567,-.3313,1.535;-.3817,.5423,1.2362;-.4692,1.4565,-.3814;.972,-.7143,1.3934;-.3591,1.7196,2.6931;-3.8917,-.9815,2.0933;-3.6676,-.3709,3.3543;-.2294,.7748,-1.2156;.3015,2.2496,-.372;-1.4515,1.9375,-.535;1.0098,-1.0858,2.4308;1.9422,-.2479,1.1509;.8436,-1.5515,.6885;-.4086,1.1696,3.6496;.5772,2.3071,2.6913;-1.2017,2.4329,2.657;-2.8051,-.8262,3.8669;-4.5831,-.5498,3.9336;-3.5001,.7124,3.2379;4.8327,-.6907,.9907;4.4157,-2.0208,.854;3.7641,-2.6684,1.8964;3.546,-1.9727,3.0818;4.0143,-.6765,3.2749;4.666,-.0425,2.2218;4.5276,-2.5207,-.1096;3.375,-3.68,1.7743;2.6849,-2.5753,4.1045;3.8245,-.1649,4.2191;5.0019,.9919,2.3358;-.7839,.476,-4.2904;-1.7662,-.4905,-4.4608;-1.4242,-1.6836,-5.0865;-.141,-1.9173,-5.5714;.8347,-.9479,-5.3786;-1.0236,1.4007,-3.7591;-2.7824,-.3424,-4.0944;-2.4391,-2.7309,-5.2207;.0846,-2.8587,-6.0726;1.8542,-1.1359,-5.7194;2.3462,-1.8803,5.0426;2.3181,-3.7201,3.939;-2.2216,-3.6339,-5.9999;-3.438,-2.6426,-4.5346;7.0748,1.1648,-1.4903;6.1184,1.5536,-2.473;8.4456,1.4874,-1.6857;8.8616,2.1459,-2.8167;9.1684,1.1898,-.9197;9.9196,2.3832,-2.9589;6.585,2.2156,-3.6428;7.9184,2.5032,-3.8099;5.8673,2.4873,-4.4203;8.2545,3.0061,-4.721;3.4198,3.1587,-3.3561;2.3098,3.5699,-4.1515;4.2295,4.1708,-2.7673;3.9863,5.503,-3.0034;5.0538,3.8836,-2.1126;4.6247,6.2595,-2.5381;2.0927,4.955,-4.3898;2.9155,5.9046,-3.8368;1.2455,5.2514,-5.016;2.7374,6.9671,-4.0243;-4.4824,-2.2125,-.2905;-4.4494,-3.0014,-1.0612;-5.0115,-2.6001,.5949;-5.0984,-1.3923,-.7055;-2.1807,-1.4297,-1.1347;-2.3183,-.3878,-1.4776;-1.1047,-1.5542,-.9288;-2.4197,-2.0799,-1.9897;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423565679</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000276654515 0.000054524379 0.022735389714 0.005356810798</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001626577468 0.001084384979</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030618227 -0.000608958 -0.000137766 0.000047127 0.000212123 0.000256593 0.000412547 0.000414573 0.000583463 0.000777336 0.000927012 0.001030598 0.001258034 0.001301245 0.001343843 0.001402606 0.001660337 0.001775480 0.001818432 0.001890063 0.002161190 0.002515899 0.002533151 0.002699012 0.002836698 0.003059933 0.003226288 0.003453647 0.003866661 0.003960911 0.004385885 0.004776959 0.004827779 0.005079368 0.005920543 0.006054575 0.006234379 0.006582004 0.006827490 0.007582134 0.008034785 0.008184681 0.009175055 0.009529446 0.009944644 0.010694325 0.011042978 0.011591142 0.011674184 0.012178047 0.012839471 0.013177965 0.013993038 0.014372617 0.015009525 0.015356714 0.015599026 0.016065581 0.016472306 0.016865719 0.017439620 0.017946690 0.019102334 0.019423020 0.019846772 0.020794616 0.021211365 0.021375148 0.022421689 0.023119016 0.025127829 0.025924227 0.026699339 0.026920545 0.027433128 0.029187475 0.029387416 0.031404500 0.033237438 0.033475650 0.033863169 0.035792520 0.036811370 0.037450376 0.039440769 0.039946989 0.040747698 0.042047050 0.043047062 0.044368537 0.045250073 0.046709490 0.047588529 0.049179042 0.050282799 0.050798002 0.051021534 0.051218407 0.052476773 0.052561591 0.052851843 0.052954745 0.054472911 0.054688999 0.055462575 0.056178360 0.056487435 0.056498537 0.057018891 0.058386358 0.060270217 0.060672674 0.061587367 0.062063010 0.063085896 0.064368620 0.065103508 0.065789906 0.066322299 0.067773947 0.068913917 0.070174004 0.072659107 0.074331231 0.074466481 0.076135152 0.077814549 0.083574896 0.085165020 0.086880898 0.087234560 0.087978424 0.090364435 0.090837909 0.092975865 0.094592357 0.095207036 0.096313361 0.097274299 0.097873216 0.098848977 0.099643977 0.100229132 0.102334158 0.102764322 0.103261871 0.103436723 0.103938991 0.105660193 0.106800613 0.107338966 0.109538186 0.110524718 0.111566236 0.112480363 0.113115894 0.114460469 0.115439696 0.116262296 0.118949052 0.120628449 0.121895188 0.122815253 0.124298433 0.125492279 0.126235283 0.126957079 0.131738095 0.134874427 0.135615320 0.142727784 0.143516199 0.146942769 0.147250012 0.149594638 0.152086989 0.154674227 0.156000710 0.156632000 0.161317353 0.161734913 0.173304725 0.173897699 0.179410300 0.183945967 0.185101429 0.189055106 0.190078214 0.193896749 0.193936459 0.198329091 0.200112326 0.205079430 0.206852911 0.207147661 0.209766841 0.212583927 0.215736957 0.217578632 0.217874565 0.220549494 0.224985571 0.226217267 0.231904820 0.234898468 0.235411601 0.235786288 0.244516870 0.255833495 0.257160251 0.263174637 0.269759362 0.280288861 0.282877548 0.286182436 0.291472725 0.296411969 0.304208006 0.305619931 0.307217918 0.313934899 0.316436667 0.317300116 0.321944438 0.329483846 0.332493084 0.351693274 0.351942772 0.354763557 0.355666833 0.359875122 0.362721341 0.363400726 0.384218556 0.386004021 0.391625970 0.410447013 0.425341557 0.430095087 0.458554765 0.468590014 0.477479400 0.482785496 0.483538242 0.487400816 0.490674849 0.509135763 0.515160208 0.535133143 0.566147463 0.572739264 0.592024057 0.593515767 0.606271011 0.607744742 0.644467299 0.646549782 0.648837554 0.674229777 0.677698936 0.684980452 0.691508071 0.693313878 0.699447036 0.704352923 0.717175452 0.741177251 0.751215537 0.758705379 0.767531637 0.772459926 0.778753853 0.810495995 0.812951275 0.818760802 0.821610975 0.823084569 0.831429343 0.832672224 0.835786160 0.840551440 0.845323373 0.846816154 0.848613268 0.858822661 0.865034277 0.865818922 0.873481601 0.881891696 0.884402911 0.889406548 0.892998761 0.900595384 0.903845729 0.922572673 0.923498846 0.933659110 0.935174007 0.965337921 0.975682902 0.985655002 1.001024386 1.017750021 1.027390230 1.041415976 1.050304963 1.057298175 1.068333472 1.086551934 1.088554074 1.103603366 1.106218140 1.112269796 1.120979592 1.124146827 1.135493993 1.143180723 1.174190648 1.175986016 1.180982399 1.186301290 1.190337033 1.196099922 1.223997424 1.228028847 1.274224604 1.301083754 1.319038032 1.328056781 1.332648741 1.334985023 1.335788844 1.341543316 1.342819761 1.344887122 1.358916631 1.378440114 1.382847749 1.384093470 1.414618706 1.419607958 1.435251819 1.551442367 1.680014325 1.775630277</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">195</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33588192" y3="0.06236282" z3="-0.19316705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38298924" y3="0.16500402" z3="0.41471764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64551419" y3="0.44249553" z3="-0.34462705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73252074" y3="1.24375875" z3="-2.26734914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38686344" y3="0.44897939" z3="-1.18652619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73414593" y3="0.85453716" z3="-3.66876083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64148343" y3="1.7563765" z3="-3.14441759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39527543" y3="2.59935647" z3="-4.63403509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56920952" y3="1.25932267" z3="-4.38552241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51809847" y3="2.93516892" z3="-5.19592106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9251623" y3="-0.4755277" z3="-3.44153432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09447199" y3="0.06619186" z3="-1.00373335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39730898" y3="-1.08103423" z3="-1.99935006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92561255" y3="-0.94810234" z3="-1.82965822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09876436" y3="-2.40514714" z3="-1.83786302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14290258" y3="-3.62087955" z3="0.68059844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00424872" y3="-5.23517706" z3="-4.74298704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23460208" y3="-4.98348864" z3="-3.70422314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83739386" y3="-4.30825013" z3="-1.0820575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78696733" y3="-4.57105961" z3="-2.85089765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55001624" y3="-5.08407873" z3="-3.24663275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85233922" y3="-4.74115154" z3="-1.93116728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49766874" y3="-4.24807855" z3="-1.52352903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81913152" y3="-4.48155826" z3="-3.19749565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34688277" y3="-5.40037954" z3="-3.92332084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88820118" y3="-4.78919209" z3="-1.58788368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02977029" y3="-3.86672699" z3="0.24067536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17150875" y3="-3.65872225" z3="0.88455354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05729396" y3="-4.1225191" z3="0.44825022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16926808" y3="-3.5266636" z3="2.35177398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23222736" y3="-3.34724647" z3="5.14985035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36573313" y3="-3.73719953" z3="3.05285298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00407894" y3="-3.23286698" z3="3.07586585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03296123" y3="-3.14326173" z3="4.46447518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39592888" y3="-3.65015313" z3="4.4419247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27882739" y3="-3.979651" z3="2.50282636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04279941" y3="-3.09750101" z3="2.5729464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10480201" y3="-2.93448934" z3="5.00454061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3335175" y3="-3.8267261" z3="4.97524033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25395998" y3="-3.28602487" z3="6.24155876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41466963" y3="-3.87951385" z3="-0.61829292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17319726" y3="-3.37241465" z3="-1.06976623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5257784" y3="0.25495304" z3="-4.71829784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0845269" y3="-1.73255961" z3="0.0294303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91507198" y3="-0.98388322" z3="1.19341914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85869592" y3="-0.32694819" z3="1.53084845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38151834" y3="0.5430326" z3="1.2315874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46737221" y3="1.45754416" z3="-0.38605161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97023753" y3="-0.7157701" z3="1.38938333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35587652" y3="1.72023541" z3="2.68854108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89167482" y3="-0.98197381" z3="2.08961141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66930076" y3="-0.36948704" z3="3.34984597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22752544" y3="0.775815" z3="-1.21954315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30577121" y3="2.24934192" z3="-0.37624446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44875622" y3="1.93912189" z3="-0.54055629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00626578" y3="-1.08762114" z3="2.42659777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94130237" y3="-0.25044231" z3="1.14811257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8416301" y3="-1.55239455" z3="0.68381367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40625633" y3="1.17032985" z3="3.64495056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58194869" y3="2.30501678" z3="2.6863494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1964177" y3="2.43570021" z3="2.65302053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80553967" y3="-0.82110278" z3="3.86294878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58414758" y3="-0.55054172" z3="3.92977751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50502042" y3="0.71408032" z3="3.23213459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83189288" y3="-0.68945749" z3="0.99106001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4172177" y3="-2.02062816" z3="0.85828236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76462052" y3="-2.66544967" z3="1.90174239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54346552" y3="-1.96590704" z3="3.08447609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00888324" y3="-0.66801339" z3="3.2735792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.661206" y3="-0.03673909" z3="2.21921233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53249673" y3="-2.52397241" z3="-0.10292165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37755225" y3="-3.67824135" z3="1.78276256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68238604" y3="-2.5665071" z3="4.10835508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81670738" y3="-0.15333929" z3="4.21585809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99465283" y3="0.99876674" z3="2.32964795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78879099" y3="0.47904494" z3="-4.28791556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77115538" y3="-0.48758964" z3="-4.45751308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4284791" y3="-1.68187057" z3="-5.08169407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14500962" y3="-1.91635242" z3="-5.56485735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83060907" y3="-0.94648186" z3="-5.37194244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02888489" y3="1.40452045" z3="-3.75824511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78774205" y3="-0.33868387" z3="-4.0927126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44274944" y3="-2.72995093" z3="-5.21411857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08131227" y3="-2.85866607" z3="-6.06445017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85044566" y3="-1.13506079" z3="-5.71166717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34461926" y3="-1.87032995" z3="5.04588773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31459865" y3="-3.71124569" z3="3.94417322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2262227" y3="-3.63199235" z3="-5.99483261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43989448" y3="-2.64323709" z3="-4.5255841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07513697" y3="1.15654405" z3="-1.49624674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11748008" y3="1.54947024" z3="-2.47615682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44659762" y3="1.47311494" z3="-1.69584688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86198057" y3="2.13006525" z3="-2.82808322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17055814" y3="1.17217355" z3="-0.93224263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92071955" y3="2.36293174" z3="-2.97362111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58292435" y3="2.21035381" z3="-3.64686993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9170302" y3="2.49206193" z3="-3.81798728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86380131" y3="2.48539983" z3="-4.42197359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25248961" y3="2.99369846" z3="-4.72995942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41680902" y3="3.15972876" z3="-3.34998285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30452332" y3="3.5720305" z3="-4.14161778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22753798" y3="4.17048606" z3="-2.76023241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98195749" y3="5.50318121" z3="-2.99068802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05418307" y3="3.88155673" z3="-2.1092342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62111756" y3="6.25838036" z3="-2.52509654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08506243" y3="4.95779745" z3="-4.37406613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90791249" y3="5.90648926" z3="-3.81913948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23568232" y3="5.25568445" z3="-4.9966482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72750493" y3="6.96967254" z3="-4.00154524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47986185" y3="-2.21550889" z3="-0.29405031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4448596" y3="-3.00528965" z3="-1.06348568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0089076" y3="-2.60281084" z3="0.59147812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09685945" y3="-1.39692812" z3="-0.71069519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18005181" y3="-1.42886694" z3="-1.13848832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31717587" y3="-0.38654953" z3="-1.48112131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10287732" y3="-1.55495832" z3="-0.93399705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41839633" y3="-2.07907333" z3="-1.99263428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3359,.0624,-.1932;7.383,.165,.4147;6.6455,.4425,-.3446;4.7325,1.2438,-2.2673;4.3869,.449,-1.1865;2.7341,.8545,-3.6688;3.6415,1.7564,-3.1444;1.3953,2.5994,-4.634;1.5692,1.2593,-4.3855;.5181,2.9352,-5.1959;2.9252,-.4755,-3.4415;3.0945,.0662,-1.0037;2.3973,-1.081,-1.9994;.9256,-.9481,-1.8297;3.0988,-2.4051,-1.8379;-.1429,-3.6209,.6806;-.0042,-5.2352,-4.743;-.2346,-4.9835,-3.7042;-.8374,-4.3083,-1.0821;.787,-4.5711,-2.8509;-1.55,-5.0841,-3.2466;-1.8523,-4.7412,-1.9312;.4977,-4.2481,-1.5235;1.8191,-4.4816,-3.1975;-2.3469,-5.4004,-3.9233;-2.8882,-4.7892,-1.5879;-1.0298,-3.8667,.2407;-2.1715,-3.6587,.8846;-3.0573,-4.1225,.4483;-2.1693,-3.5267,2.3518;-2.2322,-3.3472,5.1499;-3.3657,-3.7372,3.0529;-1.0041,-3.2329,3.0759;-1.033,-3.1433,4.4645;-3.3959,-3.6502,4.4419;-4.2788,-3.9797,2.5028;-.0428,-3.0975,2.5729;-.1048,-2.9345,5.0045;-4.3335,-3.8267,4.9752;-2.254,-3.286,6.2416;1.4147,-3.8795,-.6183;2.1732,-3.3724,-1.0698;.5258,.255,-4.7183;-3.0845,-1.7326,.0294;-2.9151,-.9839,1.1934;-1.8587,-.3269,1.5308;-.3815,.543,1.2316;-.4674,1.4575,-.3861;.9702,-.7158,1.3894;-.3559,1.7202,2.6885;-3.8917,-.982,2.0896;-3.6693,-.3695,3.3498;-.2275,.7758,-1.2195;.3058,2.2493,-.3762;-1.4488,1.9391,-.5406;1.0063,-1.0876,2.4266;1.9413,-.2504,1.1481;.8416,-1.5524,.6838;-.4063,1.1703,3.645;.5819,2.305,2.6863;-1.1964,2.4357,2.653;-2.8055,-.8211,3.8629;-4.5841,-.5505,3.9298;-3.505,.7141,3.2321;4.8319,-.6895,.9911;4.4172,-2.0206,.8583;3.7646,-2.6654,1.9017;3.5435,-1.9659,3.0845;4.0089,-.668,3.2736;4.6612,-.0367,2.2192;4.5325,-2.524,-.1029;3.3776,-3.6782,1.7828;2.6824,-2.5665,4.1084;3.8167,-.1533,4.2159;4.9947,.9988,2.3296;-.7888,.479,-4.2879;-1.7712,-.4876,-4.4575;-1.4285,-1.6819,-5.0817;-.145,-1.9164,-5.5649;.8306,-.9465,-5.3719;-1.0289,1.4045,-3.7582;-2.7877,-.3387,-4.0927;-2.4427,-2.73,-5.2141;.0813,-2.8587,-6.0645;1.8504,-1.1351,-5.7117;2.3446,-1.8703,5.0459;2.3146,-3.7112,3.9442;-2.2262,-3.632,-5.9948;-3.4399,-2.6432,-4.5256;7.0751,1.1565,-1.4962;6.1175,1.5495,-2.4762;8.4466,1.4731,-1.6958;8.862,2.1301,-2.8281;9.1706,1.1722,-.9322;9.9207,2.3629,-2.9736;6.5829,2.2104,-3.6469;7.917,2.4921,-3.818;5.8638,2.4854,-4.422;8.2525,2.9937,-4.73;3.4168,3.1597,-3.35;2.3045,3.572,-4.1416;4.2275,4.1705,-2.7602;3.982,5.5032,-2.9907;5.0542,3.8816,-2.1092;4.6211,6.2584,-2.5251;2.0851,4.9578,-4.3741;2.9079,5.9065,-3.8191;1.2357,5.2557,-4.9966;2.7275,6.9697,-4.0015;-4.4799,-2.2155,-.2941;-4.4449,-3.0053,-1.0635;-5.0089,-2.6028,.5915;-5.0969,-1.3969,-.7107;-2.1801,-1.4289,-1.1385;-2.3172,-.3865,-1.4811;-1.1029,-1.555,-.934;-2.4184,-2.0791,-1.9926;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418005136</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001085767670 0.000229895704 0.022612599266 0.005337013102</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030618366 -0.000544842 0.000032698 0.000141584 0.000212878 0.000297158 0.000390183 0.000412602 0.000582273 0.000778367 0.000926651 0.001028311 0.001257642 0.001300658 0.001346081 0.001402553 0.001658846 0.001773712 0.001818494 0.001890451 0.002160792 0.002515743 0.002536876 0.002698274 0.002836943 0.003056861 0.003226068 0.003453754 0.003865395 0.003961858 0.004386280 0.004777005 0.004829230 0.005080012 0.005920634 0.006055597 0.006234556 0.006580997 0.006827271 0.007582263 0.008034405 0.008184973 0.009175975 0.009530470 0.009944580 0.010694993 0.011046345 0.011590875 0.011675212 0.012178265 0.012844386 0.013178052 0.013991225 0.014372497 0.015014976 0.015357616 0.015598670 0.016065608 0.016500595 0.016872115 0.017439693 0.017947214 0.019105142 0.019423645 0.019846926 0.020797607 0.021211728 0.021377672 0.022421869 0.023118583 0.025133708 0.025925454 0.026702546 0.026926428 0.027436806 0.029189670 0.029388606 0.031404743 0.033238545 0.033478325 0.033863500 0.035792342 0.036811586 0.037455197 0.039450524 0.039946306 0.040749551 0.042051625 0.043106269 0.044368979 0.045250513 0.046708512 0.047589362 0.049179247 0.050283491 0.050799105 0.051021433 0.051218165 0.052477205 0.052564798 0.052851985 0.052954747 0.054471995 0.054690993 0.055464549 0.056178870 0.056486912 0.056498381 0.057020203 0.058386447 0.060270155 0.060672691 0.061587315 0.062062814 0.063090381 0.064368597 0.065104625 0.065789028 0.066322753 0.067772992 0.068915487 0.070176364 0.072659872 0.074332110 0.074466787 0.076136976 0.077819381 0.083574200 0.085166823 0.086881150 0.087233474 0.087978448 0.090364360 0.090840158 0.092975763 0.094592473 0.095208957 0.096313849 0.097274206 0.097874286 0.098858467 0.099670561 0.100229284 0.102336997 0.102769695 0.103262827 0.103436475 0.103939106 0.105656243 0.106801892 0.107339286 0.109539136 0.110527024 0.111566364 0.112480513 0.113136061 0.114490735 0.115486639 0.116262753 0.118960672 0.120638215 0.121901647 0.122820669 0.124302130 0.125495285 0.126235921 0.126957651 0.131739139 0.134875988 0.135617882 0.142727994 0.143517170 0.146942517 0.147261710 0.149595170 0.152088619 0.154675145 0.156000572 0.156634569 0.161313880 0.161736018 0.173305233 0.173899068 0.179410741 0.183946818 0.185101292 0.189060796 0.190089818 0.193900767 0.193936437 0.198332371 0.200113079 0.205079722 0.206854557 0.207147206 0.209769764 0.212595970 0.215736777 0.217580026 0.217874087 0.220550828 0.224995546 0.226218871 0.231915809 0.234898089 0.235412248 0.235787563 0.244517737 0.255837491 0.257164846 0.263180337 0.269765378 0.280289066 0.282877759 0.286182625 0.291473632 0.296412240 0.304208075 0.305619625 0.307217955 0.313935824 0.316437727 0.317306761 0.321950070 0.329486927 0.332498754 0.351693165 0.351942709 0.354768321 0.355666847 0.359875148 0.362727379 0.363402413 0.384223101 0.386002773 0.391626623 0.410446324 0.425355996 0.430121896 0.458626077 0.468592585 0.477490570 0.482809406 0.483543544 0.487410881 0.490727033 0.509141125 0.515160727 0.535135736 0.566153717 0.572745716 0.592023802 0.593516683 0.606271551 0.607749833 0.644472975 0.646555301 0.648838461 0.674231038 0.677702876 0.684994550 0.691511741 0.693314598 0.699447289 0.704353227 0.717175549 0.741177332 0.751215546 0.758707391 0.767533098 0.772460082 0.778753943 0.810496518 0.813014490 0.818761919 0.821611845 0.823092569 0.831429277 0.832696338 0.835787499 0.840629034 0.845330790 0.846826387 0.848631702 0.858833116 0.865055675 0.865819053 0.873489413 0.881918757 0.884409394 0.889416503 0.893079975 0.900598334 0.903847084 0.922627779 0.923517193 0.933660055 0.935179391 0.965377558 0.975683881 0.985655037 1.001028390 1.017758283 1.027393489 1.041417439 1.050321874 1.057298264 1.068351012 1.086553046 1.088557712 1.103603611 1.106218230 1.112269821 1.120998233 1.124149609 1.135494433 1.143189218 1.174193368 1.176079975 1.180983875 1.186301634 1.190366662 1.196103935 1.224003056 1.228030668 1.274226891 1.301105481 1.319065691 1.328060558 1.332649789 1.334991680 1.335803908 1.341551210 1.342824279 1.344887250 1.358923480 1.378441304 1.382848174 1.384095703 1.414623311 1.419610763 1.435263858 1.551443136 1.680015069 1.775646811</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">196</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33751713" y3="0.05811324" z3="-0.19483252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38536173" y3="0.16252901" z3="0.41162231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64685015" y3="0.44012894" z3="-0.34678895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73121674" y3="1.24175383" z3="-2.26669761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38728412" y3="0.44506502" z3="-1.18702436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73325648" y3="0.85264912" z3="-3.66837273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63921676" y3="1.75462096" z3="-3.14235125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38989424" y3="2.59839884" z3="-4.62701538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56762905" y3="1.25702972" z3="-4.38408458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51194277" y3="2.93415688" z3="-5.1875724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92546256" y3="-0.47706568" z3="-3.44251704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09550903" y3="0.06117739" z3="-1.00401312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39795648" y3="-1.08436025" z3="-2.00113431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92638685" y3="-0.95088117" z3="-1.83117939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09853013" y3="-2.40904938" z3="-1.8412152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14330691" y3="-3.62247668" z3="0.68190697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0109643" y3="-5.23781267" z3="-4.74179872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23985909" y3="-4.98629858" z3="-3.7026914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83893901" y3="-4.31092231" z3="-1.0799149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78316496" y3="-4.57396145" z3="-2.85055707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5544334" y3="-5.08769884" z3="-3.24345045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85470905" y3="-4.74511752" z3="-1.92744684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49569305" y3="-4.25077026" z3="-1.52287228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81505218" y3="-4.48459734" z3="-3.19851392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35161228" y3="-5.40465385" z3="-3.91913481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89079475" y3="-4.79231042" z3="-1.58232743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0306153" y3="-3.86742023" z3="0.24219507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17230537" y3="-3.65532914" z3="0.88539685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05889135" y3="-4.11909053" z3="0.45069742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16889315" y3="-3.52108633" z3="2.35268026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23021889" y3="-3.33501319" z3="5.15058239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3653515" y3="-3.72829642" z3="3.05487966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00291783" y3="-3.22743418" z3="3.07566739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0307269" y3="-3.13479845" z3="4.46422692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39527636" y3="-3.63734874" z3="4.44366167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27986256" y3="-3.96957649" z3="2.50562957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04459781" y3="-3.08981548" z3="2.57234934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10293899" y3="-2.92454703" z3="5.00322523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3343995" y3="-3.8090178" z3="4.9779644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25223579" y3="-3.26993564" z3="6.24193362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41368533" y3="-3.88145117" z3="-0.61891107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17142937" y3="-3.37520069" z3="-1.07139519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5263687" y3="0.2521056" z3="-4.71881633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08024534" y3="-1.73119189" z3="0.02603023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91287189" y3="-0.98039159" z3="1.18893599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8560891" y3="-0.32489254" z3="1.52778379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37742779" y3="0.54394665" z3="1.23063659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46080849" y3="1.45735475" z3="-0.38778266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9736555" y3="-0.71529898" z3="1.39082802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35278068" y3="1.7216718" z3="2.6872447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.891851" y3="-0.97515048" z3="2.08220179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67194474" y3="-0.36020234" z3="3.34186471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2203173" y3="0.77480207" z3="-1.22120954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30882567" y3="2.25077663" z3="-0.37733738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44308796" y3="1.93845712" z3="-0.54324369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00933922" y3="-1.08613257" z3="2.4284883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94496707" y3="-0.25042812" z3="1.14947736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8452045" y3="-1.55274977" z3="0.68609676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40655216" y3="1.17175854" z3="3.64377759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58622994" y3="2.30485013" z3="2.68708763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19203639" y3="2.43915841" z3="2.64986479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81058276" y3="-0.8133755" z3="3.85847548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58913053" y3="-0.53779861" z3="3.91902222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50495254" y3="0.72288938" z3="3.2224131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83488909" y3="-0.69467622" z3="0.98941041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41736072" y3="-2.02480439" z3="0.85569407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76508123" y3="-2.66961658" z3="1.89936379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54709527" y3="-1.97128297" z3="3.08320547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01591345" y3="-0.67478156" z3="3.27343099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66794091" y3="-0.04342333" z3="2.21892921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52947777" y3="-2.52694203" z3="-0.1068018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37560815" y3="-3.68134263" z3="1.77957676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68597091" y3="-2.5714215" z3="4.10732527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82597716" y3="-0.16087985" z3="4.21613891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00376938" y3="0.99125168" z3="2.33036891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78892193" y3="0.47284896" z3="-4.28952652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76931006" y3="-0.49549622" z3="-4.46241623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42397975" y3="-1.68781917" z3="-5.08777228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13971438" y3="-1.9188421" z3="-5.57087778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8338424" y3="-0.94755056" z3="-5.3755772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03164482" y3="1.39677976" z3="-3.75793697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78624085" y3="-0.34927486" z3="-4.09746489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43611563" y3="-2.73760052" z3="-5.22287869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08843495" y3="-2.8596455" z3="-6.07209248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85416563" y3="-1.13367063" z3="-5.71457635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35363504" y3="-1.87670547" z3="5.04782753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31273955" y3="-3.71406008" z3="3.9405305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21650494" y3="-3.63942345" z3="-6.00296717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43487834" y3="-2.65295386" z3="-4.53588647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0748739" y3="1.15604823" z3="-1.49781652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11573986" y3="1.54985641" z3="-2.47593857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44596144" y3="1.47363434" z3="-1.69884915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85940275" y3="2.13291408" z3="-2.83047469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17112379" y3="1.1710292" z3="-0.93709081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91758594" y3="2.36512616" z3="-2.97750326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57922938" y3="2.21438086" z3="-3.64564651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9130502" y3="2.49735534" z3="-3.81807294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85878477" y3="2.49123858" z3="-4.41884289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24702635" y3="3.00201364" z3="-4.72932048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41120589" y3="3.15833423" z3="-3.34316685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29703514" y3="3.57121248" z3="-4.13193808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21983473" y3="4.16908375" z3="-2.7502865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97011372" y3="5.50214463" z3="-2.9748905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04792699" y3="3.87986016" z3="-2.1011913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60676656" y3="6.25809216" z3="-2.50564675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07360643" y3="4.95732462" z3="-4.35874572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89431431" y3="5.90576957" z3="-3.80087518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22298097" y3="5.255323" z3="-4.97958011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71102357" y3="6.96896025" z3="-3.97893264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47612799" y3="-2.21176539" z3="-0.29997297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44140744" y3="-3.00228171" z3="-1.06912426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00759272" y3="-2.59753947" z3="0.58498533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09126148" y3="-1.39243075" z3="-0.71812421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17294917" y3="-1.42976836" z3="-1.14027786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30996501" y3="-0.38824579" z3="-1.48476975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09803632" y3="-1.55324446" z3="-0.93223406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4112751" y3="-2.08086988" z3="-1.99538459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3375,.0581,-.1948;7.3854,.1625,.4116;6.6469,.4401,-.3468;4.7312,1.2418,-2.2667;4.3873,.4451,-1.187;2.7333,.8526,-3.6684;3.6392,1.7546,-3.1424;1.3899,2.5984,-4.627;1.5676,1.257,-4.3841;.5119,2.9342,-5.1876;2.9255,-.4771,-3.4425;3.0955,.0612,-1.004;2.398,-1.0844,-2.0011;.9264,-.9509,-1.8312;3.0985,-2.409,-1.8412;-.1433,-3.6225,.6819;-.011,-5.2378,-4.7418;-.2399,-4.9863,-3.7027;-.8389,-4.3109,-1.0799;.7832,-4.574,-2.8506;-1.5544,-5.0877,-3.2435;-1.8547,-4.7451,-1.9274;.4957,-4.2508,-1.5229;1.8151,-4.4846,-3.1985;-2.3516,-5.4047,-3.9191;-2.8908,-4.7923,-1.5823;-1.0306,-3.8674,.2422;-2.1723,-3.6553,.8854;-3.0589,-4.1191,.4507;-2.1689,-3.5211,2.3527;-2.2302,-3.335,5.1506;-3.3654,-3.7283,3.0549;-1.0029,-3.2274,3.0757;-1.0307,-3.1348,4.4642;-3.3953,-3.6373,4.4437;-4.2799,-3.9696,2.5056;-.0446,-3.0898,2.5723;-.1029,-2.9245,5.0032;-4.3344,-3.809,4.978;-2.2522,-3.2699,6.2419;1.4137,-3.8815,-.6189;2.1714,-3.3752,-1.0714;.5264,.2521,-4.7188;-3.0802,-1.7312,.026;-2.9129,-.9804,1.1889;-1.8561,-.3249,1.5278;-.3774,.5439,1.2306;-.4608,1.4574,-.3878;.9737,-.7153,1.3908;-.3528,1.7217,2.6872;-3.8919,-.9752,2.0822;-3.6719,-.3602,3.3419;-.2203,.7748,-1.2212;.3088,2.2508,-.3773;-1.4431,1.9385,-.5432;1.0093,-1.0861,2.4285;1.945,-.2504,1.1495;.8452,-1.5527,.6861;-.4066,1.1718,3.6438;.5862,2.3049,2.6871;-1.192,2.4392,2.6499;-2.8106,-.8134,3.8585;-4.5891,-.5378,3.919;-3.505,.7229,3.2224;4.8349,-.6947,.9894;4.4174,-2.0248,.8557;3.7651,-2.6696,1.8994;3.5471,-1.9713,3.0832;4.0159,-.6748,3.2734;4.6679,-.0434,2.2189;4.5295,-2.5269,-.1068;3.3756,-3.6813,1.7796;2.686,-2.5714,4.1073;3.826,-.1609,4.2161;5.0038,.9913,2.3304;-.7889,.4728,-4.2895;-1.7693,-.4955,-4.4624;-1.424,-1.6878,-5.0878;-.1397,-1.9188,-5.5709;.8338,-.9476,-5.3756;-1.0316,1.3968,-3.7579;-2.7862,-.3493,-4.0975;-2.4361,-2.7376,-5.2229;.0884,-2.8596,-6.0721;1.8542,-1.1337,-5.7146;2.3536,-1.8767,5.0478;2.3127,-3.7141,3.9405;-2.2165,-3.6394,-6.003;-3.4349,-2.653,-4.5359;7.0749,1.156,-1.4978;6.1157,1.5499,-2.4759;8.446,1.4736,-1.6988;8.8594,2.1329,-2.8305;9.1711,1.171,-.9371;9.9176,2.3651,-2.9775;6.5792,2.2144,-3.6456;7.9131,2.4974,-3.8181;5.8588,2.4912,-4.4188;8.247,3.002,-4.7293;3.4112,3.1583,-3.3432;2.297,3.5712,-4.1319;4.2198,4.1691,-2.7503;3.9701,5.5021,-2.9749;5.0479,3.8799,-2.1012;4.6068,6.2581,-2.5056;2.0736,4.9573,-4.3587;2.8943,5.9058,-3.8009;1.223,5.2553,-4.9796;2.711,6.969,-3.9789;-4.4761,-2.2118,-.3;-4.4414,-3.0023,-1.0691;-5.0076,-2.5975,.585;-5.0913,-1.3924,-.7181;-2.1729,-1.4298,-1.1403;-2.31,-.3882,-1.4848;-1.098,-1.5532,-.9322;-2.4113,-2.0809,-1.9954;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417667468</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001487415955 0.000241029950 0.021216642926 0.005331810772</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030619854 -0.000306584 0.000036814 0.000167471 0.000221943 0.000276314 0.000409442 0.000432544 0.000587630 0.000778224 0.000928213 0.001032667 0.001257594 0.001301335 0.001346291 0.001402817 0.001659634 0.001774028 0.001819484 0.001891713 0.002160939 0.002518180 0.002539527 0.002699189 0.002836821 0.003056485 0.003229697 0.003453719 0.003866365 0.003961434 0.004388281 0.004777135 0.004831087 0.005079907 0.005921029 0.006055121 0.006234591 0.006580885 0.006827736 0.007582372 0.008035573 0.008185345 0.009180823 0.009532127 0.009945941 0.010694725 0.011045788 0.011591801 0.011675430 0.012179778 0.012849031 0.013178370 0.013991401 0.014374460 0.015014150 0.015358387 0.015598746 0.016065658 0.016520016 0.016874877 0.017439842 0.017948076 0.019108143 0.019425197 0.019846783 0.020800359 0.021211569 0.021380525 0.022424387 0.023118570 0.025137557 0.025929019 0.026706364 0.026935427 0.027441181 0.029192085 0.029389253 0.031405313 0.033241906 0.033482513 0.033864797 0.035793567 0.036811561 0.037461039 0.039457750 0.039947405 0.040749639 0.042053661 0.043176120 0.044372506 0.045252242 0.046711630 0.047591415 0.049179376 0.050284667 0.050800929 0.051021436 0.051218216 0.052477333 0.052568841 0.052852411 0.052955027 0.054472571 0.054693832 0.055467042 0.056179409 0.056486878 0.056498347 0.057022042 0.058386357 0.060270445 0.060673602 0.061587465 0.062062703 0.063099170 0.064368685 0.065104765 0.065789040 0.066324656 0.067773111 0.068915398 0.070177075 0.072660340 0.074334016 0.074467002 0.076141104 0.077824455 0.083575671 0.085167809 0.086881380 0.087233377 0.087978777 0.090364291 0.090842389 0.092975367 0.094592442 0.095214101 0.096313989 0.097277006 0.097876088 0.098863763 0.099710670 0.100230136 0.102338984 0.102777294 0.103263989 0.103436412 0.103938943 0.105656873 0.106803775 0.107341029 0.109539920 0.110530093 0.111566446 0.112480839 0.113163491 0.114541794 0.115558370 0.116262490 0.118978011 0.120654038 0.121907992 0.122824929 0.124310886 0.125500059 0.126236985 0.126957861 0.131741414 0.134876594 0.135618659 0.142728076 0.143517749 0.146942749 0.147270641 0.149595452 0.152087389 0.154679430 0.156001154 0.156638233 0.161312869 0.161736038 0.173306283 0.173899608 0.179410757 0.183949719 0.185101694 0.189067525 0.190096846 0.193903791 0.193936437 0.198336384 0.200115590 0.205082210 0.206856575 0.207147620 0.209773549 0.212596671 0.215737694 0.217580566 0.217874522 0.220553160 0.225009097 0.226220658 0.231929510 0.234898123 0.235413295 0.235788509 0.244519198 0.255838494 0.257171760 0.263193663 0.269771030 0.280289345 0.282878045 0.286182837 0.291474322 0.296412401 0.304208327 0.305619867 0.307217998 0.313938192 0.316440581 0.317317777 0.321955948 0.329488308 0.332507676 0.351693544 0.351942886 0.354775185 0.355666799 0.359877154 0.362734034 0.363405351 0.384234089 0.386002886 0.391626590 0.410447649 0.425372873 0.430157527 0.458730449 0.468596594 0.477501576 0.482823222 0.483545496 0.487427074 0.490816835 0.509143494 0.515161201 0.535140430 0.566158563 0.572759389 0.592024297 0.593517159 0.606271697 0.607756046 0.644484561 0.646562167 0.648838317 0.674234298 0.677709075 0.685020313 0.691513858 0.693319337 0.699451707 0.704353933 0.717176343 0.741177448 0.751215697 0.758708155 0.767553375 0.772462258 0.778754050 0.810496715 0.813118878 0.818765304 0.821612782 0.823102161 0.831432836 0.832727463 0.835788863 0.840725022 0.845336543 0.846844874 0.848642738 0.858843814 0.865105741 0.865819044 0.873490931 0.881929524 0.884417752 0.889418857 0.893183575 0.900603487 0.903848396 0.922673357 0.923530475 0.933660359 0.935182688 0.965430757 0.975683956 0.985655035 1.001031631 1.017791989 1.027404626 1.041417577 1.050349605 1.057298221 1.068363368 1.086553854 1.088559886 1.103607273 1.106219511 1.112269974 1.121000231 1.124153337 1.135495785 1.143206568 1.174194396 1.176257374 1.180983853 1.186302746 1.190390974 1.196106483 1.224011040 1.228030939 1.274225869 1.301155218 1.319097060 1.328061810 1.332653126 1.334994060 1.335810354 1.341566351 1.342835145 1.344887203 1.358931050 1.378441690 1.382850085 1.384095988 1.414663455 1.419611302 1.435269732 1.551443263 1.680020587 1.775647733</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">197</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3414904" y3="0.05310016" z3="-0.19509064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38872392" y3="0.16277645" z3="0.41123705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64934167" y3="0.43934905" z3="-0.34662115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73108955" y3="1.23943491" z3="-2.26455889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38982232" y3="0.43919743" z3="-1.1863763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73177518" y3="0.84943364" z3="-3.66491538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63694289" y3="1.75193295" z3="-3.13791741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38649016" y3="2.59406722" z3="-4.62161683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56498373" y3="1.25362065" z3="-4.37902903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.507825" y3="2.92956849" z3="-5.18133997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.926556" y3="-0.48090901" z3="-3.44234229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0989106" y3="0.05199912" z3="-1.0029233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40005078" y3="-1.09118469" z3="-2.00171266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92871452" y3="-0.95725293" z3="-1.82965433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09972719" y3="-2.41683575" z3="-1.84546012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14467902" y3="-3.62096626" z3="0.6793205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01665279" y3="-5.24246156" z3="-4.74258279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24478361" y3="-4.99004873" z3="-3.70353037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84223879" y3="-4.31182172" z3="-1.08085283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77874557" y3="-4.5780788" z3="-2.85229138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55944509" y3="-5.08915759" z3="-3.2434551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85908245" y3="-4.74490956" z3="-1.92768469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49219145" y3="-4.25375061" z3="-1.52470443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81027552" y3="-4.48954148" z3="-3.20083558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35765254" y3="-5.40532387" z3="-3.91852601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89432187" y3="-4.79186907" z3="-1.58240237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03236775" y3="-3.86682651" z3="0.24105888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17326983" y3="-3.6533028" z3="0.8848846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06056214" y3="-4.11670643" z3="0.45105515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16947736" y3="-3.51626455" z3="2.35168237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22963098" y3="-3.32551529" z3="5.14902757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3658187" y3="-3.72130596" z3="3.05458856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00315568" y3="-3.22218164" z3="3.0735592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03044703" y3="-3.12732628" z3="4.46186657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39479392" y3="-3.62838712" z3="4.44327544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27991399" y3="-3.96385509" z3="2.50624961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04203459" y3="-3.09090542" z3="2.56927402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10094863" y3="-2.91960609" z3="5.00050017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33250761" y3="-3.80027276" z3="4.97812141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25032002" y3="-3.25972722" z3="6.24047314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41132963" y3="-3.88528493" z3="-0.62145842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17062204" y3="-3.38182073" z3="-1.07491107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52479186" y3="0.24778258" z3="-4.71624086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07999676" y3="-1.72855035" z3="0.02357561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90952967" y3="-0.97745337" z3="1.18588457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84971333" y3="-0.32638644" z3="1.5239673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37460584" y3="0.5475325" z3="1.22835984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45684579" y3="1.45556032" z3="-0.3931774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97940498" y3="-0.70776136" z3="1.39641581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35913723" y3="1.73064727" z3="2.68054203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88827499" y3="-0.96824529" z3="2.07960319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66644666" y3="-0.35188824" z3="3.33814523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21441401" y3="0.77040068" z3="-1.22328474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31484812" y3="2.24871825" z3="-0.38490401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43866503" y3="1.93495415" z3="-0.55200745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01359318" y3="-1.07520233" z3="2.43536873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95029302" y3="-0.24227963" z3="1.15543945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85364088" y3="-1.54786265" z3="0.69424342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41310495" y3="1.18474615" z3="3.63909024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5769233" y3="2.31806198" z3="2.68080914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20141904" y3="2.44362897" z3="2.63732413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80545638" y3="-0.80484881" z3="3.85500382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58329548" y3="-0.52723632" z3="3.91650653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49807496" y3="0.7305342" z3="3.21663949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84085152" y3="-0.70242674" z3="0.98820964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41675076" y3="-2.03028894" z3="0.85084974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76370098" y3="-2.67558311" z3="1.89367762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55165761" y3="-1.98005629" z3="3.08041832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02800575" y3="-0.68672631" z3="3.27439796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68077428" y3="-0.05491933" z3="2.22063682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52385893" y3="-2.52976515" z3="-0.11355904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36875223" y3="-3.68499558" z3="1.77103391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68927625" y3="-2.57897615" z3="4.10413791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84357851" y3="-0.17527166" z3="4.21993524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02220808" y3="0.97765328" z3="2.33501405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79138311" y3="0.4673029" z3="-4.28784157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7710065" y3="-0.50102223" z3="-4.46327953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42389189" y3="-1.6926407" z3="-5.08931402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13849174" y3="-1.92238888" z3="-5.57025717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83405465" y3="-0.9509498" z3="-5.37343347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03495173" y3="1.39045212" z3="-3.75597193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78896727" y3="-0.35580965" z3="-4.1005404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43537511" y3="-2.74274319" z3="-5.22641771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0913532" y3="-2.86258846" z3="-6.07191625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85514764" y3="-1.13601053" z3="-5.71136464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35838416" y3="-1.88400305" z3="5.0451653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31393592" y3="-3.72067902" z3="3.93691268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21305834" y3="-3.64471702" z3="-6.00542242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43627029" y3="-2.65757573" z3="-4.54307395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07491669" y3="1.15966004" z3="-1.49603406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11466489" y3="1.55202608" z3="-2.47360862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44480446" y3="1.48390392" z3="-1.69545954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85612319" y3="2.14749014" z3="-2.82534024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17085988" y3="1.1835299" z3="-0.93363414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91361047" y3="2.3863428" z3="-2.97070025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57613597" y3="2.22004285" z3="-3.64203651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90871413" y3="2.50886799" z3="-3.81308059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85513421" y3="2.49469482" z3="-4.41548701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24104156" y3="3.01579804" z3="-4.72326575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4071491" y3="3.15555302" z3="-3.33675398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29265228" y3="3.56766808" z3="-4.12531212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21492872" y3="4.16642497" z3="-2.74319981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96447906" y3="5.49922364" z3="-2.96729425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04335757" y3="3.87739826" z3="-2.09451362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60160391" y3="6.25444886" z3="-2.49900096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06792974" y3="4.95371102" z3="-4.35096314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88804427" y3="5.90266558" z3="-3.79256494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21677015" y3="5.25142385" z3="-4.97120718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70357645" y3="6.96605073" z3="-3.96971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47669669" y3="-2.20685138" z3="-0.30098546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44336986" y3="-2.99702165" z3="-1.06990282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00783143" y3="-2.59187131" z3="0.58421625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09079204" y3="-1.38653868" z3="-0.7187119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17258561" y3="-1.43053989" z3="-1.14351274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30836826" y3="-0.38975677" z3="-1.49092376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0957624" y3="-1.55644106" z3="-0.93621249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40934056" y3="-2.08443996" z3="-1.99552161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3415,.0531,-.1951;7.3887,.1628,.4112;6.6493,.4393,-.3466;4.7311,1.2394,-2.2646;4.3898,.4392,-1.1864;2.7318,.8494,-3.6649;3.6369,1.7519,-3.1379;1.3865,2.5941,-4.6216;1.565,1.2536,-4.379;.5078,2.9296,-5.1813;2.9266,-.4809,-3.4423;3.0989,.052,-1.0029;2.4001,-1.0912,-2.0017;.9287,-.9573,-1.8297;3.0997,-2.4168,-1.8455;-.1447,-3.621,.6793;-.0167,-5.2425,-4.7426;-.2448,-4.99,-3.7035;-.8422,-4.3118,-1.0809;.7787,-4.5781,-2.8523;-1.5594,-5.0892,-3.2435;-1.8591,-4.7449,-1.9277;.4922,-4.2538,-1.5247;1.8103,-4.4895,-3.2008;-2.3577,-5.4053,-3.9185;-2.8943,-4.7919,-1.5824;-1.0324,-3.8668,.2411;-2.1733,-3.6533,.8849;-3.0606,-4.1167,.4511;-2.1695,-3.5163,2.3517;-2.2296,-3.3255,5.149;-3.3658,-3.7213,3.0546;-1.0032,-3.2222,3.0736;-1.0304,-3.1273,4.4619;-3.3948,-3.6284,4.4433;-4.2799,-3.9639,2.5062;-.042,-3.0909,2.5693;-.1009,-2.9196,5.0005;-4.3325,-3.8003,4.9781;-2.2503,-3.2597,6.2405;1.4113,-3.8853,-.6215;2.1706,-3.3818,-1.0749;.5248,.2478,-4.7162;-3.08,-1.7286,.0236;-2.9095,-.9775,1.1859;-1.8497,-.3264,1.524;-.3746,.5475,1.2284;-.4568,1.4556,-.3932;.9794,-.7078,1.3964;-.3591,1.7306,2.6805;-3.8883,-.9682,2.0796;-3.6664,-.3519,3.3381;-.2144,.7704,-1.2233;.3148,2.2487,-.3849;-1.4387,1.935,-.552;1.0136,-1.0752,2.4354;1.9503,-.2423,1.1554;.8536,-1.5479,.6942;-.4131,1.1847,3.6391;.5769,2.3181,2.6808;-1.2014,2.4436,2.6373;-2.8055,-.8048,3.855;-4.5833,-.5272,3.9165;-3.4981,.7305,3.2166;4.8409,-.7024,.9882;4.4168,-2.0303,.8508;3.7637,-2.6756,1.8937;3.5517,-1.9801,3.0804;4.028,-.6867,3.2744;4.6808,-.0549,2.2206;4.5239,-2.5298,-.1136;3.3688,-3.685,1.771;2.6893,-2.579,4.1041;3.8436,-.1753,4.2199;5.0222,.9777,2.335;-.7914,.4673,-4.2878;-1.771,-.501,-4.4633;-1.4239,-1.6926,-5.0893;-.1385,-1.9224,-5.5703;.8341,-.9509,-5.3734;-1.035,1.3905,-3.756;-2.789,-.3558,-4.1005;-2.4354,-2.7427,-5.2264;.0914,-2.8626,-6.0719;1.8551,-1.136,-5.7114;2.3584,-1.884,5.0452;2.3139,-3.7207,3.9369;-2.2131,-3.6447,-6.0054;-3.4363,-2.6576,-4.5431;7.0749,1.1597,-1.496;6.1147,1.552,-2.4736;8.4448,1.4839,-1.6955;8.8561,2.1475,-2.8253;9.1709,1.1835,-.9336;9.9136,2.3863,-2.9707;6.5761,2.22,-3.642;7.9087,2.5089,-3.8131;5.8551,2.4947,-4.4155;8.241,3.0158,-4.7233;3.4071,3.1556,-3.3368;2.2927,3.5677,-4.1253;4.2149,4.1664,-2.7432;3.9645,5.4992,-2.9673;5.0434,3.8774,-2.0945;4.6016,6.2544,-2.499;2.0679,4.9537,-4.351;2.888,5.9027,-3.7926;1.2168,5.2514,-4.9712;2.7036,6.9661,-3.9697;-4.4767,-2.2069,-.301;-4.4434,-2.997,-1.0699;-5.0078,-2.5919,.5842;-5.0908,-1.3865,-.7187;-2.1726,-1.4305,-1.1435;-2.3084,-.3898,-1.4909;-1.0958,-1.5564,-.9362;-2.4093,-2.0844,-1.9955;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422698245</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001236595560 0.000224143779 0.020917570743 0.005340225918</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030620013 -0.000258637 0.000074443 0.000168783 0.000206990 0.000277327 0.000406048 0.000415825 0.000585671 0.000778741 0.000928988 0.001035010 0.001257948 0.001304099 0.001346640 0.001402636 0.001660850 0.001775672 0.001819298 0.001894937 0.002161843 0.002518119 0.002543958 0.002699075 0.002836514 0.003056265 0.003237017 0.003453779 0.003867699 0.003961238 0.004389993 0.004776692 0.004833077 0.005079893 0.005921178 0.006055984 0.006236537 0.006581722 0.006828433 0.007582501 0.008035765 0.008186040 0.009187485 0.009536269 0.009947878 0.010694932 0.011045928 0.011594333 0.011676216 0.012183551 0.012851924 0.013179377 0.013991264 0.014378056 0.015013936 0.015358280 0.015603344 0.016066353 0.016526325 0.016881304 0.017440405 0.017949402 0.019114138 0.019425673 0.019847034 0.020802589 0.021211617 0.021385344 0.022425627 0.023118642 0.025141188 0.025933151 0.026709303 0.026943328 0.027444446 0.029196474 0.029389594 0.031406118 0.033245705 0.033484298 0.033866104 0.035794447 0.036811599 0.037465437 0.039462362 0.039949057 0.040749676 0.042054923 0.043240268 0.044376225 0.045254997 0.046719051 0.047594947 0.049179340 0.050286849 0.050802160 0.051021907 0.051218221 0.052477306 0.052572196 0.052853196 0.052955303 0.054474405 0.054696921 0.055468943 0.056179587 0.056486828 0.056498217 0.057023357 0.058386714 0.060270456 0.060674068 0.061588453 0.062062905 0.063112411 0.064368765 0.065105375 0.065789370 0.066326132 0.067773171 0.068915324 0.070177271 0.072662142 0.074336704 0.074467057 0.076146912 0.077828792 0.083575698 0.085168297 0.086881307 0.087233466 0.087979678 0.090364151 0.090845430 0.092975540 0.094592783 0.095217383 0.096313989 0.097282451 0.097879422 0.098865114 0.099757243 0.100232894 0.102340008 0.102786986 0.103264687 0.103436901 0.103938932 0.105660860 0.106808901 0.107341705 0.109540191 0.110533025 0.111566491 0.112481865 0.113194258 0.114599977 0.115630168 0.116262479 0.118999177 0.120669946 0.121912242 0.122826149 0.124321733 0.125504994 0.126237009 0.126958004 0.131743028 0.134876184 0.135618546 0.142727907 0.143517628 0.146943207 0.147275919 0.149596707 0.152088837 0.154681232 0.156001444 0.156639455 0.161313350 0.161736163 0.173310581 0.173899926 0.179414521 0.183951741 0.185102433 0.189071127 0.190106508 0.193906597 0.193936627 0.198339312 0.200118082 0.205083455 0.206860002 0.207150393 0.209776309 0.212597506 0.215740608 0.217580319 0.217877280 0.220554402 0.225016954 0.226221851 0.231939541 0.234898447 0.235414202 0.235789027 0.244521342 0.255838610 0.257175216 0.263209783 0.269774678 0.280289323 0.282878298 0.286182884 0.291476991 0.296413779 0.304208516 0.305619827 0.307218272 0.313939750 0.316442568 0.317325339 0.321962153 0.329488501 0.332511053 0.351696019 0.351943432 0.354782822 0.355666883 0.359879226 0.362737901 0.363405960 0.384243439 0.386002863 0.391626639 0.410449199 0.425379370 0.430188387 0.458822145 0.468600151 0.477509573 0.482829823 0.483547033 0.487437237 0.490887660 0.509145192 0.515161225 0.535142349 0.566160662 0.572775144 0.592024840 0.593518799 0.606272575 0.607763708 0.644499886 0.646568524 0.648838378 0.674234446 0.677713035 0.685045102 0.691514895 0.693322224 0.699457379 0.704354686 0.717177174 0.741177454 0.751215921 0.758708162 0.767557376 0.772462612 0.778754165 0.810498534 0.813229350 0.818768370 0.821613313 0.823118727 0.831436210 0.832767972 0.835791228 0.840790093 0.845339933 0.846849175 0.848649882 0.858852271 0.865167568 0.865819498 0.873490927 0.881931168 0.884433816 0.889419354 0.893276060 0.900610011 0.903849592 0.922716635 0.923541470 0.933660696 0.935183755 0.965471198 0.975683973 0.985655553 1.001035292 1.017827552 1.027410777 1.041417603 1.050388042 1.057300638 1.068370656 1.086554098 1.088561119 1.103616638 1.106221637 1.112270296 1.121002926 1.124155080 1.135497187 1.143219342 1.174194854 1.176386186 1.180983851 1.186303354 1.190410195 1.196107050 1.224019443 1.228031527 1.274227297 1.301198461 1.319118677 1.328063555 1.332656276 1.335000030 1.335826119 1.341585642 1.342838120 1.344888833 1.358935609 1.378442689 1.382850550 1.384095989 1.414675117 1.419613992 1.435294063 1.551443259 1.680028767 1.775649120</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">198</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34268916" y3="0.04962584" z3="-0.19312298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3890886" y3="0.16666109" z3="0.41560392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6494394" y3="0.44114064" z3="-0.34280899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73000326" y3="1.23598373" z3="-2.26182682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39039238" y3="0.43406653" z3="-1.18456942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73042671" y3="0.84521599" z3="-3.66170106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6351826" y3="1.74792185" z3="-3.13454317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38225009" y3="2.59026824" z3="-4.61475036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5626928" y3="1.24867996" z3="-4.37460125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5032014" y3="2.92536531" z3="-5.17404256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92650651" y3="-0.48488759" z3="-3.44075061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10036914" y3="0.04456322" z3="-1.00119716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4017245" y3="-1.09790982" z3="-2.0008266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93037446" y3="-0.96565279" z3="-1.82741754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1021472" y3="-2.42339286" z3="-1.84702897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14365223" y3="-3.6176304" z3="0.6755404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01898021" y3="-5.24698861" z3="-4.74395024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24656061" y3="-4.99275557" z3="-3.70523486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84244191" y3="-4.30965336" z3="-1.08364959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77849347" y3="-4.58416138" z3="-2.85367726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56162247" y3="-5.08697434" z3="-3.24581225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86020756" y3="-4.74047358" z3="-1.93048313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49251239" y3="-4.25719994" z3="-1.52657924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81071815" y3="-4.50021381" z3="-3.20160733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36099649" y3="-5.40053883" z3="-3.92105067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89637276" y3="-4.78189407" z3="-1.58567236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03196353" y3="-3.86255389" z3="0.2375512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17245746" y3="-3.6496997" z3="0.88233968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05988879" y3="-4.11322552" z3="0.44905103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1671817" y3="-3.51395805" z3="2.3493338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22482409" y3="-3.32737997" z3="5.14715468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.363273" y3="-3.71895664" z3="3.05283913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99986152" y3="-3.22157594" z3="3.0708367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02616584" y3="-3.12858009" z3="4.45936159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39115793" y3="-3.6280108" z3="4.44168625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27893744" y3="-3.95869239" z3="2.50457318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04166199" y3="-3.08549703" z3="2.56627718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09786228" y3="-2.91929596" z3="4.99747975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3294412" y3="-3.79875136" z3="4.9770057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24512976" y3="-3.26235952" z3="6.23858494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41289364" y3="-3.89165268" z3="-0.62315453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17189109" y3="-3.38890929" z3="-1.07629326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52285705" y3="0.24291673" z3="-4.71202103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08090535" y3="-1.72465688" z3="0.02284555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90619545" y3="-0.97354408" z3="1.18432905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84460179" y3="-0.32351058" z3="1.51840189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37099982" y3="0.55282628" z3="1.2214937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45078637" y3="1.45230272" z3="-0.40473344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98369545" y3="-0.70044902" z3="1.40020254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3611836" y3="1.74520322" z3="2.66664642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88171061" y3="-0.963256" z3="2.08150706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65467574" y3="-0.34760636" z3="3.3393234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21281321" y3="0.76242144" z3="-1.23280786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32173963" y3="2.2429631" z3="-0.40059169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43134827" y3="1.93598149" z3="-0.56374279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01401361" y3="-1.06358808" z3="2.44098252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95578567" y3="-0.23644414" z3="1.16040901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85976814" y3="-1.5436979" z3="0.70142012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4175334" y3="1.20528273" z3="3.62864533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57433171" y3="2.33420309" z3="2.6659404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20455153" y3="2.45730851" z3="2.61640656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79487228" y3="-0.80523618" z3="3.85438268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57144741" y3="-0.51858404" z3="3.91908145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48099447" y3="0.73441359" z3="3.21776519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84341775" y3="-0.70794485" z3="0.98934292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41620847" y3="-2.03447074" z3="0.84968849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76298263" y3="-2.68058488" z3="1.89190992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55394444" y3="-1.98726178" z3="3.08043359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03417278" y3="-0.69587302" z3="3.27686832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68724683" y3="-0.06326678" z3="2.22373633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52067353" y3="-2.53194878" z3="-0.11604175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36545563" y3="-3.6886475" z3="1.76747919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69017319" y3="-2.5860081" z3="4.10300732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85198521" y3="-0.18607009" z3="4.22344602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03150768" y3="0.96809935" z3="2.34014273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79413111" y3="0.46325349" z3="-4.28752569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7740214" y3="-0.50447463" z3="-4.46518052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42673582" y3="-1.69602316" z3="-5.09078565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14056023" y3="-1.92696937" z3="-5.56909509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83250759" y3="-0.95610402" z3="-5.36790919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03906436" y3="1.38655432" z3="-3.75560438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79249464" y3="-0.35846249" z3="-4.10429841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43910402" y3="-2.74497874" z3="-5.2324723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0892629" y3="-2.86711737" z3="-6.07040137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85422422" y3="-1.14206501" z3="-5.70291619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35784699" y3="-1.89062301" z3="5.04306124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31444034" y3="-3.72771539" z3="3.93521431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21577475" y3="-3.6467293" z3="-6.0117733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44174383" y3="-2.65922613" z3="-4.55132623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07352627" y3="1.16347597" z3="-1.49123031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11280165" y3="1.5525293" z3="-2.46966862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44222728" y3="1.49320584" z3="-1.6887872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85210691" y3="2.15932964" z3="-2.8176172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16850186" y3="1.1952189" z3="-0.92625205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90848244" y3="2.40199341" z3="-2.96150488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57296487" y3="2.22265908" z3="-3.63731534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90456971" y3="2.51738081" z3="-3.8064389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85176437" y3="2.49492055" z3="-4.41142611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23588398" y3="3.02688794" z3="-4.71580158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40402338" y3="3.15161539" z3="-3.33226726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28856624" y3="3.56374032" z3="-4.11960488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21131095" y3="4.16294646" z3="-2.73881094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95999547" y3="5.49587903" z3="-2.96272299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0397342" y3="3.8745924" z3="-2.08984721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5960959" y3="6.25212499" z3="-2.49346918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06356112" y3="4.94956383" z3="-4.34593711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88374993" y3="5.89871133" z3="-3.78848597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21243071" y3="5.24670181" z3="-4.96645984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6996298" y3="6.96172243" z3="-3.96666829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47903043" y3="-2.20194238" z3="-0.29699051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44931702" y3="-2.99495239" z3="-1.06363116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00870191" y3="-2.58347311" z3="0.59087691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09275939" y3="-1.38191021" z3="-0.71559297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17633474" y3="-1.42818341" z3="-1.14678112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31354137" y3="-0.38742786" z3="-1.49423993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10118114" y3="-1.55125093" z3="-0.94005485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41674589" y3="-2.08205091" z3="-1.99906297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3427,.0496,-.1931;7.3891,.1667,.4156;6.6494,.4411,-.3428;4.73,1.236,-2.2618;4.3904,.4341,-1.1846;2.7304,.8452,-3.6617;3.6352,1.7479,-3.1345;1.3823,2.5903,-4.6148;1.5627,1.2487,-4.3746;.5032,2.9254,-5.174;2.9265,-.4849,-3.4408;3.1004,.0446,-1.0012;2.4017,-1.0979,-2.0008;.9304,-.9657,-1.8274;3.1021,-2.4234,-1.847;-.1437,-3.6176,.6755;-.019,-5.247,-4.744;-.2466,-4.9928,-3.7052;-.8424,-4.3097,-1.0836;.7785,-4.5842,-2.8537;-1.5616,-5.087,-3.2458;-1.8602,-4.7405,-1.9305;.4925,-4.2572,-1.5266;1.8107,-4.5002,-3.2016;-2.361,-5.4005,-3.9211;-2.8964,-4.7819,-1.5857;-1.032,-3.8626,.2376;-2.1725,-3.6497,.8823;-3.0599,-4.1132,.4491;-2.1672,-3.514,2.3493;-2.2248,-3.3274,5.1472;-3.3633,-3.719,3.0528;-.9999,-3.2216,3.0708;-1.0262,-3.1286,4.4594;-3.3912,-3.628,4.4417;-4.2789,-3.9587,2.5046;-.0417,-3.0855,2.5663;-.0979,-2.9193,4.9975;-4.3294,-3.7988,4.977;-2.2451,-3.2624,6.2386;1.4129,-3.8917,-.6232;2.1719,-3.3889,-1.0763;.5229,.2429,-4.712;-3.0809,-1.7247,.0228;-2.9062,-.9735,1.1843;-1.8446,-.3235,1.5184;-.371,.5528,1.2215;-.4508,1.4523,-.4047;.9837,-.7004,1.4002;-.3612,1.7452,2.6666;-3.8817,-.9633,2.0815;-3.6547,-.3476,3.3393;-.2128,.7624,-1.2328;.3217,2.243,-.4006;-1.4313,1.936,-.5637;1.014,-1.0636,2.441;1.9558,-.2364,1.1604;.8598,-1.5437,.7014;-.4175,1.2053,3.6286;.5743,2.3342,2.6659;-1.2046,2.4573,2.6164;-2.7949,-.8052,3.8544;-4.5714,-.5186,3.9191;-3.481,.7344,3.2178;4.8434,-.7079,.9893;4.4162,-2.0345,.8497;3.763,-2.6806,1.8919;3.5539,-1.9873,3.0804;4.0342,-.6959,3.2769;4.6872,-.0633,2.2237;4.5207,-2.5319,-.116;3.3655,-3.6886,1.7675;2.6902,-2.586,4.103;3.852,-.1861,4.2234;5.0315,.9681,2.3401;-.7941,.4633,-4.2875;-1.774,-.5045,-4.4652;-1.4267,-1.696,-5.0908;-.1406,-1.927,-5.5691;.8325,-.9561,-5.3679;-1.0391,1.3866,-3.7556;-2.7925,-.3585,-4.1043;-2.4391,-2.745,-5.2325;.0893,-2.8671,-6.0704;1.8542,-1.1421,-5.7029;2.3578,-1.8906,5.0431;2.3144,-3.7277,3.9352;-2.2158,-3.6467,-6.0118;-3.4417,-2.6592,-4.5513;7.0735,1.1635,-1.4912;6.1128,1.5525,-2.4697;8.4422,1.4932,-1.6888;8.8521,2.1593,-2.8176;9.1685,1.1952,-.9263;9.9085,2.402,-2.9615;6.573,2.2227,-3.6373;7.9046,2.5174,-3.8064;5.8518,2.4949,-4.4114;8.2359,3.0269,-4.7158;3.404,3.1516,-3.3323;2.2886,3.5637,-4.1196;4.2113,4.1629,-2.7388;3.96,5.4959,-2.9627;5.0397,3.8746,-2.0898;4.5961,6.2521,-2.4935;2.0636,4.9496,-4.3459;2.8837,5.8987,-3.7885;1.2124,5.2467,-4.9665;2.6996,6.9617,-3.9667;-4.479,-2.2019,-.297;-4.4493,-2.995,-1.0636;-5.0087,-2.5835,.5909;-5.0928,-1.3819,-.7156;-2.1763,-1.4282,-1.1468;-2.3135,-.3874,-1.4942;-1.1012,-1.5513,-.9401;-2.4167,-2.0821,-1.9991;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423639090</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001141742463 0.000246520210 0.019117180698 0.005337670783</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030620019 -0.000322908 0.000065690 0.000159832 0.000207600 0.000287460 0.000410692 0.000435080 0.000595196 0.000788708 0.000932071 0.001038974 0.001260017 0.001305141 0.001350461 0.001402685 0.001661273 0.001780010 0.001823543 0.001910226 0.002163315 0.002518532 0.002548197 0.002700976 0.002839098 0.003056353 0.003242296 0.003454387 0.003869868 0.003961124 0.004392109 0.004776786 0.004834291 0.005079870 0.005922343 0.006056307 0.006244552 0.006586352 0.006829378 0.007582554 0.008036058 0.008185887 0.009194808 0.009541800 0.009952480 0.010698421 0.011046550 0.011596611 0.011676054 0.012187271 0.012855137 0.013178962 0.013991994 0.014384743 0.015013798 0.015358523 0.015613052 0.016072107 0.016525304 0.016893044 0.017441192 0.017950184 0.019123933 0.019425789 0.019848263 0.020805031 0.021211642 0.021391589 0.022426499 0.023118562 0.025142114 0.025937557 0.026709912 0.026949450 0.027444655 0.029201697 0.029389568 0.031406756 0.033249440 0.033486143 0.033867292 0.035795937 0.036811635 0.037471214 0.039466582 0.039951125 0.040749695 0.042056275 0.043301498 0.044379938 0.045260206 0.046726159 0.047600761 0.049179324 0.050288383 0.050802525 0.051022776 0.051218738 0.052477316 0.052573932 0.052854186 0.052956017 0.054485607 0.054701742 0.055470683 0.056179601 0.056486946 0.056498196 0.057024176 0.058387314 0.060270811 0.060674554 0.061591541 0.062062816 0.063125231 0.064369449 0.065105580 0.065790141 0.066328109 0.067773469 0.068915019 0.070177310 0.072664328 0.074340836 0.074467060 0.076150263 0.077828493 0.083575589 0.085168180 0.086881211 0.087233321 0.087981509 0.090364720 0.090850697 0.092975900 0.094593211 0.095222704 0.096313972 0.097290943 0.097881047 0.098865706 0.099797936 0.100238428 0.102340210 0.102795622 0.103265991 0.103437631 0.103940452 0.105661507 0.106812473 0.107342593 0.109541251 0.110536018 0.111566490 0.112481925 0.113221142 0.114661813 0.115714518 0.116263391 0.119022062 0.120685692 0.121913762 0.122826228 0.124339327 0.125508305 0.126237889 0.126957834 0.131744574 0.134875856 0.135622106 0.142727856 0.143517779 0.146943538 0.147277772 0.149596002 0.152093561 0.154686243 0.156001729 0.156638550 0.161316222 0.161737274 0.173315067 0.173901172 0.179419942 0.183953918 0.185104461 0.189071235 0.190109779 0.193908687 0.193938710 0.198340829 0.200120644 0.205084970 0.206864862 0.207159739 0.209776741 0.212610584 0.215757307 0.217580883 0.217885228 0.220555936 0.225019583 0.226222689 0.231946398 0.234898917 0.235415698 0.235789014 0.244523946 0.255839416 0.257176091 0.263232108 0.269776879 0.280289360 0.282878298 0.286182916 0.291478519 0.296419500 0.304208970 0.305620596 0.307220071 0.313939723 0.316442719 0.317327585 0.321967328 0.329488927 0.332511286 0.351699885 0.351943690 0.354791637 0.355668187 0.359884059 0.362739673 0.363405969 0.384256691 0.386002958 0.391626799 0.410451351 0.425382589 0.430204956 0.458923750 0.468602836 0.477518044 0.482831678 0.483548174 0.487438716 0.490936532 0.509146110 0.515161828 0.535142414 0.566160669 0.572789877 0.592030705 0.593520697 0.606274371 0.607776833 0.644509117 0.646573776 0.648838365 0.674235971 0.677715798 0.685056759 0.691516257 0.693326597 0.699471138 0.704355337 0.717177976 0.741177452 0.751216094 0.758710195 0.767558954 0.772462975 0.778754300 0.810498727 0.813334805 0.818770799 0.821613345 0.823139613 0.831437262 0.832834951 0.835795172 0.840860333 0.845346517 0.846849474 0.848650042 0.858857388 0.865234291 0.865819677 0.873493590 0.881931227 0.884453390 0.889421171 0.893375953 0.900616663 0.903852996 0.922758787 0.923550367 0.933661332 0.935183702 0.965486818 0.975683991 0.985659181 1.001038820 1.017873014 1.027411454 1.041418173 1.050428440 1.057309291 1.068373733 1.086554094 1.088561779 1.103636739 1.106224181 1.112270318 1.121032702 1.124155073 1.135499215 1.143226508 1.174195610 1.176478238 1.180983913 1.186303872 1.190428966 1.196107397 1.224034597 1.228034294 1.274227136 1.301247096 1.319144494 1.328066607 1.332656683 1.335008180 1.335845867 1.341601585 1.342840789 1.344890788 1.358937168 1.378443656 1.382851000 1.384098491 1.414675045 1.419623701 1.435354131 1.551443942 1.680052599 1.775649268</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">199</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33985563" y3="0.04630099" z3="-0.1909811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38505536" y3="0.16677987" z3="0.42010926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64585001" y3="0.43998105" z3="-0.33916605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72724549" y3="1.23279268" z3="-2.25971666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38799166" y3="0.42917937" z3="-1.18348798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72829673" y3="0.84126144" z3="-3.66096462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63198579" y3="1.74433698" z3="-3.132195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37983235" y3="2.58542389" z3="-4.61368444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56021619" y3="1.24490699" z3="-4.37329648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50061608" y3="2.9204615" z3="-5.17273137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92608509" y3="-0.48918024" z3="-3.44243578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0983711" y3="0.03718746" z3="-1.00192474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40255289" y3="-1.10553724" z3="-2.0033813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9308435" y3="-0.97688611" z3="-1.82990914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10594043" y3="-2.429612" z3="-1.85111994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14211372" y3="-3.61148698" z3="0.67027251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01584556" y3="-5.25760723" z3="-4.74386965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24421129" y3="-4.99893142" z3="-3.70635023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84172516" y3="-4.30557427" z3="-1.08760936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78063416" y3="-4.59096861" z3="-2.85477187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56048608" y3="-5.08635659" z3="-3.24847115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86022643" y3="-4.73403182" z3="-1.93484691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49394887" y3="-4.25935248" z3="-1.52899943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81371431" y3="-4.51215747" z3="-3.20162765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35922184" y3="-5.40032671" z3="-3.92351317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89680094" y3="-4.77060163" z3="-1.59169365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03068465" y3="-3.8561504" z3="0.23293787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17052531" y3="-3.64470105" z3="0.87900842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05813055" y3="-4.10807234" z3="0.44577603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16466479" y3="-3.50989089" z3="2.34598908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22096753" y3="-3.32799447" z3="5.1439927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3599852" y3="-3.71650954" z3="3.04996756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99726493" y3="-3.21843182" z3="3.0671008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02239646" y3="-3.12866925" z3="4.45586448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38742811" y3="-3.62738846" z3="4.43887163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2743801" y3="-3.95790984" z3="2.50223653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03721369" y3="-3.08529817" z3="2.56182477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09163816" y3="-2.92453915" z3="4.99438566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32482535" y3="-3.79990837" z3="4.97447205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24004554" y3="-3.26600217" z3="6.23566592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41431386" y3="-3.89511808" z3="-0.62530489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17550304" y3="-3.39519997" z3="-1.07897005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52053766" y3="0.23938796" z3="-4.71179223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08250819" y3="-1.71851885" z3="0.02270414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90288169" y3="-0.96741443" z3="1.18343219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8396403" y3="-0.3172686" z3="1.51258829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36706497" y3="0.55896464" z3="1.2137129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44278286" y3="1.45201374" z3="-0.41642801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98648472" y3="-0.6942475" z3="1.40035151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36040491" y3="1.75850636" z3="2.6526016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87471188" y3="-0.9570234" z3="2.08470421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64066452" y3="-0.34476787" z3="3.34330152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20691841" y3="0.75787178" z3="-1.24080453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33642786" y3="2.23801772" z3="-0.41580844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42018453" y3="1.93897033" z3="-0.57858405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01355213" y3="-1.05544667" z3="2.44192357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95907017" y3="-0.23137818" z3="1.16232293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86378163" y3="-1.53853327" z3="0.70263014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41506838" y3="1.22439991" z3="3.61763345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57264898" y3="2.35054151" z3="2.64858805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20575672" y3="2.46697443" z3="2.59795892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77684875" y3="-0.8022193" z3="3.8519626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55320354" y3="-0.51873218" z3="3.92869493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47001845" y3="0.73720412" z3="3.22345214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84104117" y3="-0.711818" z3="0.991229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41247979" y3="-2.0378686" z3="0.85072966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75993775" y3="-2.68439032" z3="1.89305474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55277594" y3="-1.99191941" z3="3.08242782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03436382" y3="-0.70116408" z3="3.27964707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68687135" y3="-0.0681549" z3="2.22642783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51554843" y3="-2.53454072" z3="-0.11572511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.361704" y3="-3.69217697" z3="1.76822035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69117049" y3="-2.59136066" z3="4.10640975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85389682" y3="-0.19220201" z3="4.22715958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03222431" y3="0.96276845" z3="2.34356412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79688385" y3="0.46084979" z3="-4.28774296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77729529" y3="-0.50602616" z3="-4.46728752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42942752" y3="-1.69827799" z3="-5.09112835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1423549" y3="-1.93008064" z3="-5.56688889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83062631" y3="-0.96017824" z3="-5.36830812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04108061" y3="1.38453772" z3="-3.7575863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79654379" y3="-0.35912719" z3="-4.10881469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44199187" y3="-2.74640181" z3="-5.23134569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08800502" y3="-2.87091399" z3="-6.06706091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85255515" y3="-1.14687161" z3="-5.70251738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36013475" y3="-1.89651209" z3="5.04775977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3169144" y3="-3.73323453" z3="3.93944406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2184005" y3="-3.64889309" z3="-6.0092048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4451854" y3="-2.65947704" z3="-4.55143724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06997474" y3="1.16423852" z3="-1.48657302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1097715" y3="1.5524482" z3="-2.46578715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43832634" y3="1.49756042" z3="-1.68193582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84830729" y3="2.16584853" z3="-2.80955669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16423398" y3="1.20052092" z3="-0.91869562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90453375" y3="2.41195011" z3="-2.95161431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57015118" y3="2.22502646" z3="-3.63216126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90129093" y3="2.52273321" z3="-3.7992761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84939042" y3="2.49651679" z3="-4.40692383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23273115" y3="3.03342298" z3="-4.70775092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39944353" y3="3.14817812" z3="-3.32784365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2846059" y3="3.55976412" z3="-4.11605643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20500712" y3="4.15981372" z3="-2.73212342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95321993" y3="5.49237342" z3="-2.95528816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03335145" y3="3.87144878" z3="-2.08310796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58905454" y3="6.24799698" z3="-2.48571525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05802665" y3="4.94589389" z3="-4.34019807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87685041" y3="5.89540174" z3="-3.78079868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20659964" y3="5.24310268" z3="-4.96030778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69141539" y3="6.95878075" z3="-3.95725678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48188364" y3="-2.19602415" z3="-0.29160746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45499234" y3="-2.98852533" z3="-1.05856771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00749351" y3="-2.57776045" z3="0.59824056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09805787" y3="-1.37626217" z3="-0.70762063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18206069" y3="-1.42269708" z3="-1.15025156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31817892" y3="-0.38173305" z3="-1.49692456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10404988" y3="-1.55116919" z3="-0.94908033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42590766" y3="-2.076268" z3="-2.00088091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3399,.0463,-.191;7.3851,.1668,.4201;6.6459,.44,-.3392;4.7272,1.2328,-2.2597;4.388,.4292,-1.1835;2.7283,.8413,-3.661;3.632,1.7443,-3.1322;1.3798,2.5854,-4.6137;1.5602,1.2449,-4.3733;.5006,2.9205,-5.1727;2.9261,-.4892,-3.4424;3.0984,.0372,-1.0019;2.4026,-1.1055,-2.0034;.9308,-.9769,-1.8299;3.1059,-2.4296,-1.8511;-.1421,-3.6115,.6703;-.0158,-5.2576,-4.7439;-.2442,-4.9989,-3.7064;-.8417,-4.3056,-1.0876;.7806,-4.591,-2.8548;-1.5605,-5.0864,-3.2485;-1.8602,-4.734,-1.9348;.4939,-4.2594,-1.529;1.8137,-4.5122,-3.2016;-2.3592,-5.4003,-3.9235;-2.8968,-4.7706,-1.5917;-1.0307,-3.8562,.2329;-2.1705,-3.6447,.879;-3.0581,-4.1081,.4458;-2.1647,-3.5099,2.346;-2.221,-3.328,5.144;-3.36,-3.7165,3.05;-.9973,-3.2184,3.0671;-1.0224,-3.1287,4.4559;-3.3874,-3.6274,4.4389;-4.2744,-3.9579,2.5022;-.0372,-3.0853,2.5618;-.0916,-2.9245,4.9944;-4.3248,-3.7999,4.9745;-2.24,-3.266,6.2357;1.4143,-3.8951,-.6253;2.1755,-3.3952,-1.079;.5205,.2394,-4.7118;-3.0825,-1.7185,.0227;-2.9029,-.9674,1.1834;-1.8396,-.3173,1.5126;-.3671,.559,1.2137;-.4428,1.452,-.4164;.9865,-.6942,1.4004;-.3604,1.7585,2.6526;-3.8747,-.957,2.0847;-3.6407,-.3448,3.3433;-.2069,.7579,-1.2408;.3364,2.238,-.4158;-1.4202,1.939,-.5786;1.0136,-1.0554,2.4419;1.9591,-.2314,1.1623;.8638,-1.5385,.7026;-.4151,1.2244,3.6176;.5726,2.3505,2.6486;-1.2058,2.467,2.598;-2.7768,-.8022,3.852;-4.5532,-.5187,3.9287;-3.47,.7372,3.2235;4.841,-.7118,.9912;4.4125,-2.0379,.8507;3.7599,-2.6844,1.8931;3.5528,-1.9919,3.0824;4.0344,-.7012,3.2796;4.6869,-.0682,2.2264;4.5155,-2.5345,-.1157;3.3617,-3.6922,1.7682;2.6912,-2.5914,4.1064;3.8539,-.1922,4.2272;5.0322,.9628,2.3436;-.7969,.4608,-4.2877;-1.7773,-.506,-4.4673;-1.4294,-1.6983,-5.0911;-.1424,-1.9301,-5.5669;.8306,-.9602,-5.3683;-1.0411,1.3845,-3.7576;-2.7965,-.3591,-4.1088;-2.442,-2.7464,-5.2313;.088,-2.8709,-6.0671;1.8526,-1.1469,-5.7025;2.3601,-1.8965,5.0478;2.3169,-3.7332,3.9394;-2.2184,-3.6489,-6.0092;-3.4452,-2.6595,-4.5514;7.07,1.1642,-1.4866;6.1098,1.5524,-2.4658;8.4383,1.4976,-1.6819;8.8483,2.1658,-2.8096;9.1642,1.2005,-.9187;9.9045,2.412,-2.9516;6.5702,2.225,-3.6322;7.9013,2.5227,-3.7993;5.8494,2.4965,-4.4069;8.2327,3.0334,-4.7078;3.3994,3.1482,-3.3278;2.2846,3.5598,-4.1161;4.205,4.1598,-2.7321;3.9532,5.4924,-2.9553;5.0334,3.8714,-2.0831;4.5891,6.248,-2.4857;2.058,4.9459,-4.3402;2.8769,5.8954,-3.7808;1.2066,5.2431,-4.9603;2.6914,6.9588,-3.9573;-4.4819,-2.196,-.2916;-4.455,-2.9885,-1.0586;-5.0075,-2.5778,.5982;-5.0981,-1.3763,-.7076;-2.1821,-1.4227,-1.1503;-2.3182,-.3817,-1.4969;-1.104,-1.5512,-.9491;-2.4259,-2.0763,-2.0009;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420843056</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001227070851 0.000284289321 0.019290505127 0.005333990872</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030620325 -0.000435306 0.000062587 0.000166167 0.000209579 0.000286827 0.000410617 0.000435317 0.000593561 0.000785383 0.000934389 0.001040495 0.001261337 0.001305137 0.001350049 0.001402719 0.001661296 0.001783247 0.001828209 0.001928610 0.002165122 0.002518489 0.002550894 0.002703365 0.002841624 0.003056402 0.003251345 0.003454396 0.003875194 0.003961178 0.004393493 0.004779010 0.004835257 0.005079890 0.005924812 0.006057209 0.006261287 0.006594768 0.006831647 0.007582605 0.008036859 0.008185887 0.009207995 0.009545630 0.009961103 0.010698919 0.011046481 0.011601311 0.011675610 0.012189954 0.012857596 0.013180381 0.013993210 0.014393432 0.015013728 0.015359438 0.015631389 0.016093218 0.016539565 0.016909205 0.017441281 0.017952413 0.019144091 0.019426004 0.019852058 0.020807318 0.021212029 0.021398896 0.022426573 0.023118875 0.025142571 0.025942315 0.026709869 0.026953874 0.027444555 0.029207681 0.029391014 0.031407049 0.033253584 0.033488433 0.033868086 0.035797317 0.036811704 0.037480387 0.039471878 0.039958865 0.040750062 0.042058034 0.043362442 0.044384255 0.045272047 0.046739275 0.047613626 0.049179325 0.050289312 0.050802607 0.051024999 0.051220020 0.052477394 0.052574889 0.052855357 0.052957010 0.054504918 0.054706490 0.055473094 0.056180242 0.056487645 0.056498511 0.057025054 0.058387953 0.060272708 0.060674669 0.061597241 0.062062883 0.063137791 0.064370575 0.065105496 0.065791734 0.066331804 0.067774341 0.068915005 0.070178892 0.072666921 0.074350918 0.074467397 0.076153892 0.077829130 0.083575528 0.085168914 0.086881140 0.087233481 0.087986404 0.090366326 0.090856602 0.092977228 0.094594221 0.095229819 0.096314213 0.097302405 0.097882299 0.098865781 0.099834840 0.100245312 0.102340388 0.102805292 0.103266430 0.103440076 0.103941614 0.105665572 0.106818282 0.107344027 0.109546092 0.110538653 0.111566750 0.112482082 0.113249057 0.114740278 0.115803524 0.116270385 0.119039234 0.120703159 0.121914720 0.122826599 0.124361262 0.125510783 0.126241564 0.126957570 0.131745973 0.134875894 0.135633966 0.142727535 0.143518369 0.146944305 0.147278459 0.149596377 0.152104859 0.154691259 0.156003043 0.156637957 0.161320395 0.161738602 0.173321329 0.173905705 0.179437306 0.183955992 0.185111014 0.189072054 0.190110394 0.193908878 0.193941960 0.198340939 0.200123129 0.205085017 0.206867701 0.207170511 0.209777175 0.212672377 0.215790118 0.217582905 0.217897218 0.220558262 0.225020013 0.226223099 0.231950484 0.234900087 0.235418314 0.235789673 0.244526359 0.255844733 0.257176764 0.263259375 0.269777761 0.280289651 0.282878329 0.286182941 0.291478710 0.296432670 0.304210152 0.305621794 0.307221485 0.313939739 0.316442729 0.317329024 0.321971992 0.329495868 0.332511294 0.351704301 0.351947187 0.354797599 0.355670059 0.359889945 0.362740543 0.363409405 0.384269037 0.386002871 0.391626869 0.410456136 0.425384718 0.430215268 0.459058433 0.468605481 0.477527220 0.482831807 0.483548121 0.487441670 0.490980407 0.509146399 0.515162603 0.535142397 0.566161082 0.572804262 0.592043416 0.593521254 0.606275723 0.607792845 0.644523833 0.646578182 0.648839982 0.674237365 0.677717166 0.685066544 0.691516491 0.693331694 0.699500647 0.704355940 0.717180894 0.741177457 0.751216580 0.758717083 0.767566629 0.772464472 0.778755229 0.810499120 0.813440758 0.818782059 0.821613499 0.823152344 0.831439185 0.832908531 0.835803134 0.840925731 0.845351419 0.846849591 0.848650273 0.858862118 0.865310146 0.865820046 0.873510549 0.881946967 0.884471066 0.889436387 0.893468216 0.900629737 0.903856629 0.922787336 0.923554082 0.933662825 0.935186102 0.965490502 0.975684906 0.985666228 1.001042853 1.017945582 1.027411982 1.041421500 1.050481486 1.057326981 1.068374000 1.086554184 1.088561904 1.103676359 1.106231224 1.112270404 1.121129361 1.124155763 1.135504739 1.143238671 1.174198746 1.176567493 1.180986387 1.186305797 1.190441951 1.196109986 1.224047473 1.228042257 1.274227797 1.301291679 1.319165347 1.328068218 1.332656693 1.335012601 1.335856347 1.341667605 1.342848821 1.344893365 1.358937151 1.378445401 1.382852431 1.384104048 1.414675477 1.419635602 1.435411652 1.551445430 1.680123037 1.775650119</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">200</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3368087" y3="0.04307509" z3="-0.18879715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38126562" y3="0.16689194" z3="0.4243522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64235812" y3="0.43955211" z3="-0.33537636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72408219" y3="1.23053021" z3="-2.25690289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38525399" y3="0.42537644" z3="-1.18176432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72592953" y3="0.83850865" z3="-3.65898351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6285677" y3="1.74184125" z3="-3.12910212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37413125" y3="2.58358946" z3="-4.60700802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55714954" y3="1.24159351" z3="-4.37044812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49462128" y3="2.91843739" z3="-5.16569198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92569165" y3="-0.49194456" z3="-3.44252131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09615573" y3="0.03141546" z3="-1.00156062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40300643" y3="-1.11157736" z3="-2.00458434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93095947" y3="-0.98605353" z3="-1.83137198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10878308" y3="-2.43447906" z3="-1.85357579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13821532" y3="-3.60706983" z3="0.66561125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01431302" y3="-5.26568403" z3="-4.74490614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2424203" y3="-5.00390824" z3="-3.708139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83906889" y3="-4.30264823" z3="-1.09118689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78374482" y3="-4.59935547" z3="-2.8560705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55937527" y3="-5.08471723" z3="-3.25135991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85849456" y3="-4.72843461" z3="-1.93872935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49735826" y3="-4.26376085" z3="-1.53122303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81744356" y3="-4.52572896" z3="-3.20164606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36007374" y3="-5.39524525" z3="-3.92671644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89585757" y3="-4.75915716" z3="-1.59680269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02739273" y3="-3.85053773" z3="0.22855995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16679118" y3="-3.64016064" z3="0.87563774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05433841" y3="-4.1034758" z3="0.44234963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16031544" y3="-3.50706296" z3="2.34277629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21595448" y3="-3.33025817" z3="5.14120877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35626385" y3="-3.71317133" z3="3.04643091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99225543" y3="-3.21781785" z3="3.06432996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01793646" y3="-3.12937996" z3="4.45314394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38294801" y3="-3.62737748" z3="4.43563335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27309591" y3="-3.94953615" z3="2.49791091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03394076" y3="-3.08148291" z3="2.55929158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09009856" y3="-2.92195311" z3="4.99172474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32075509" y3="-3.79978321" z3="4.97095123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23521938" y3="-3.26940466" z3="6.23288698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41973082" y3="-3.9031361" z3="-0.62732669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1794186" y3="-3.40252723" z3="-1.08067522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51805525" y3="0.23555686" z3="-4.71014686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08164817" y3="-1.71336094" z3="0.02242707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89823875" y3="-0.96185926" z3="1.18218614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83515605" y3="-0.30958485" z3="1.50654177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36172729" y3="0.56487382" z3="1.20497209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43407422" y3="1.4507544" z3="-0.42888211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98972482" y3="-0.68932066" z3="1.39885382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35537248" y3="1.77164739" z3="2.63802451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.866054" y3="-0.95255955" z3="2.08785924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62711028" y3="-0.34065164" z3="3.34522434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20396839" y3="0.75220717" z3="-1.25183653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34706914" y3="2.23299983" z3="-0.4313771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4094567" y3="1.94394284" z3="-0.59095706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01237562" y3="-1.04909161" z3="2.44107651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96438296" y3="-0.22877218" z3="1.16331419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86761296" y3="-1.53432463" z3="0.70191266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41248053" y3="1.24233437" z3="3.605828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57926735" y3="2.3621055" z3="2.63198855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19958323" y3="2.48203301" z3="2.57866841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76307109" y3="-0.80033615" z3="3.85100077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53852721" y3="-0.51257959" z3="3.93325934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45322841" y3="0.74159351" z3="3.22531452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83832141" y3="-0.71573305" z3="0.99307387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40912399" y3="-2.04151988" z3="0.85257919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75735077" y3="-2.6880893" z3="1.89538243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55185912" y3="-1.99599457" z3="3.08529513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03386565" y3="-0.70546499" z3="3.28226034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68535612" y3="-0.0723771" z3="2.22848219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51173127" y3="-2.53813663" z3="-0.11375738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35863495" y3="-3.69568024" z3="1.77061941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69065276" y3="-2.59549372" z3="4.10949859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85427385" y3="-0.1967173" z3="4.22992624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03073287" y3="0.95846768" z3="2.34522699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80009995" y3="0.45764119" z3="-4.29019341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7803173" y3="-0.50925012" z3="-4.4689697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43230885" y3="-1.7018934" z3="-5.09269661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1451164" y3="-1.934798" z3="-5.56696358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82843018" y3="-0.96435501" z3="-5.36287411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04610139" y3="1.38178814" z3="-3.75990595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79966837" y3="-0.36162791" z3="-4.11127106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44526153" y3="-2.75012871" z3="-5.23602423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08537761" y3="-2.87577008" z3="-6.0665818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85098388" y3="-1.1515872" z3="-5.69480931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36071382" y3="-1.90078592" z3="5.05076531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31435041" y3="-3.73709285" z3="3.94159505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22113051" y3="-3.65229968" z3="-6.01469548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44907356" y3="-2.66331688" z3="-4.55688152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06620743" y3="1.16479213" z3="-1.48202399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10609999" y3="1.55197019" z3="-2.4617808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4340108" y3="1.49968539" z3="-1.67614403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84380066" y3="2.16908156" z3="-2.80303775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15969576" y3="1.20321747" z3="-0.91246333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89954603" y3="2.41598457" z3="-2.94424112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56615714" y3="2.22546964" z3="-3.62739278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89698993" y3="2.52521251" z3="-3.79324583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84549891" y3="2.49654094" z3="-4.4024361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22835449" y3="3.03728043" z3="-4.70108394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39434497" y3="3.14548591" z3="-3.32273411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27831004" y3="3.55746342" z3="-4.10930235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19900317" y3="4.15678055" z3="-2.72579993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94466049" y3="5.48994626" z3="-2.94570214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02744263" y3="3.86850532" z3="-2.07689322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57862141" y3="6.24628533" z3="-2.4735742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05052617" y3="4.94328339" z3="-4.33203697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86824697" y3="5.89265004" z3="-3.77127425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.1992001" y3="5.24021249" z3="-4.95234401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68199718" y3="6.95573232" z3="-3.94657645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48185363" y3="-2.19147478" z3="-0.28670548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45761406" y3="-2.98603717" z3="-1.05191452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00515757" y3="-2.57128144" z3="0.60557669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09868957" y3="-1.37238124" z3="-0.70266876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18470744" y3="-1.41840853" z3="-1.15341498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32201714" y3="-0.37727931" z3="-1.49960952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10838233" y3="-1.54393781" z3="-0.95387858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43243732" y3="-2.07148704" z3="-2.0039987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3368,.0431,-.1888;7.3813,.1669,.4244;6.6424,.4396,-.3354;4.7241,1.2305,-2.2569;4.3853,.4254,-1.1818;2.7259,.8385,-3.659;3.6286,1.7418,-3.1291;1.3741,2.5836,-4.607;1.5571,1.2416,-4.3704;.4946,2.9184,-5.1657;2.9257,-.4919,-3.4425;3.0962,.0314,-1.0016;2.403,-1.1116,-2.0046;.931,-.9861,-1.8314;3.1088,-2.4345,-1.8536;-.1382,-3.6071,.6656;-.0143,-5.2657,-4.7449;-.2424,-5.0039,-3.7081;-.8391,-4.3026,-1.0912;.7837,-4.5994,-2.8561;-1.5594,-5.0847,-3.2514;-1.8585,-4.7284,-1.9387;.4974,-4.2638,-1.5312;1.8174,-4.5257,-3.2016;-2.3601,-5.3952,-3.9267;-2.8959,-4.7592,-1.5968;-1.0274,-3.8505,.2286;-2.1668,-3.6402,.8756;-3.0543,-4.1035,.4423;-2.1603,-3.5071,2.3428;-2.216,-3.3303,5.1412;-3.3563,-3.7132,3.0464;-.9923,-3.2178,3.0643;-1.0179,-3.1294,4.4531;-3.3829,-3.6274,4.4356;-4.2731,-3.9495,2.4979;-.0339,-3.0815,2.5593;-.0901,-2.922,4.9917;-4.3208,-3.7998,4.971;-2.2352,-3.2694,6.2329;1.4197,-3.9031,-.6273;2.1794,-3.4025,-1.0807;.5181,.2356,-4.7101;-3.0816,-1.7134,.0224;-2.8982,-.9619,1.1822;-1.8352,-.3096,1.5065;-.3617,.5649,1.205;-.4341,1.4508,-.4289;.9897,-.6893,1.3989;-.3554,1.7716,2.638;-3.8661,-.9526,2.0879;-3.6271,-.3407,3.3452;-.204,.7522,-1.2518;.3471,2.233,-.4314;-1.4095,1.9439,-.591;1.0124,-1.0491,2.4411;1.9644,-.2288,1.1633;.8676,-1.5343,.7019;-.4125,1.2423,3.6058;.5793,2.3621,2.632;-1.1996,2.482,2.5787;-2.7631,-.8003,3.851;-4.5385,-.5126,3.9333;-3.4532,.7416,3.2253;4.8383,-.7157,.9931;4.4091,-2.0415,.8526;3.7574,-2.6881,1.8954;3.5519,-1.996,3.0853;4.0339,-.7055,3.2823;4.6854,-.0724,2.2285;4.5117,-2.5381,-.1138;3.3586,-3.6957,1.7706;2.6907,-2.5955,4.1095;3.8543,-.1967,4.2299;5.0307,.9585,2.3452;-.8001,.4576,-4.2902;-1.7803,-.5093,-4.469;-1.4323,-1.7019,-5.0927;-.1451,-1.9348,-5.567;.8284,-.9644,-5.3629;-1.0461,1.3818,-3.7599;-2.7997,-.3616,-4.1113;-2.4453,-2.7501,-5.236;.0854,-2.8758,-6.0666;1.851,-1.1516,-5.6948;2.3607,-1.9008,5.0508;2.3144,-3.7371,3.9416;-2.2211,-3.6523,-6.0147;-3.4491,-2.6633,-4.5569;7.0662,1.1648,-1.482;6.1061,1.552,-2.4618;8.434,1.4997,-1.6761;8.8438,2.1691,-2.803;9.1597,1.2032,-.9125;9.8995,2.416,-2.9442;6.5662,2.2255,-3.6274;7.897,2.5252,-3.7932;5.8455,2.4965,-4.4024;8.2284,3.0373,-4.7011;3.3943,3.1455,-3.3227;2.2783,3.5575,-4.1093;4.199,4.1568,-2.7258;3.9447,5.4899,-2.9457;5.0274,3.8685,-2.0769;4.5786,6.2463,-2.4736;2.0505,4.9433,-4.332;2.8682,5.8927,-3.7713;1.1992,5.2402,-4.9523;2.682,6.9557,-3.9466;-4.4819,-2.1915,-.2867;-4.4576,-2.986,-1.0519;-5.0052,-2.5713,.6056;-5.0987,-1.3724,-.7027;-2.1847,-1.4184,-1.1534;-2.322,-.3773,-1.4996;-1.1084,-1.5439,-.9539;-2.4324,-2.0715,-2.004;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414998059</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001689072609 0.000317649813 0.018299382259 0.005345917316</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030620191 -0.000614455 0.000070571 0.000177719 0.000210986 0.000287909 0.000411104 0.000433767 0.000592887 0.000788023 0.000934131 0.001040916 0.001261125 0.001306225 0.001350908 0.001402697 0.001661584 0.001784221 0.001828792 0.001933220 0.002164707 0.002518721 0.002551782 0.002703786 0.002845763 0.003056270 0.003258381 0.003454605 0.003875789 0.003961292 0.004393732 0.004779177 0.004835253 0.005079786 0.005926203 0.006057475 0.006284843 0.006605399 0.006836423 0.007582767 0.008036815 0.008186363 0.009218066 0.009552147 0.009973020 0.010699310 0.011046435 0.011609431 0.011675488 0.012196262 0.012859544 0.013181229 0.013996646 0.014399559 0.015013388 0.015361364 0.015654638 0.016128441 0.016595108 0.016937481 0.017441303 0.017955568 0.019176986 0.019426059 0.019859919 0.020807513 0.021212889 0.021404222 0.022426601 0.023119308 0.025142488 0.025946874 0.026710292 0.026957486 0.027444750 0.029216808 0.029394953 0.031407247 0.033257253 0.033489376 0.033868650 0.035797901 0.036812011 0.037492089 0.039478257 0.039966765 0.040750649 0.042062214 0.043434260 0.044388264 0.045279319 0.046757307 0.047625842 0.049179348 0.050289239 0.050802645 0.051028440 0.051221302 0.052477509 0.052575496 0.052857033 0.052957980 0.054533364 0.054710801 0.055476737 0.056181967 0.056489155 0.056499001 0.057025560 0.058388232 0.060275556 0.060674815 0.061602119 0.062063276 0.063148897 0.064372540 0.065105494 0.065793756 0.066333975 0.067775019 0.068915021 0.070181162 0.072669948 0.074368302 0.074467803 0.076159427 0.077832245 0.083576672 0.085170455 0.086881282 0.087233517 0.087993586 0.090369501 0.090865873 0.092978831 0.094595433 0.095234917 0.096314507 0.097310947 0.097882966 0.098865700 0.099863603 0.100252102 0.102340829 0.102814686 0.103267828 0.103442939 0.103941696 0.105671177 0.106826428 0.107343962 0.109551070 0.110539643 0.111567198 0.112482665 0.113270116 0.114823564 0.115921361 0.116290641 0.119052370 0.120720644 0.121916607 0.122827686 0.124387148 0.125511764 0.126245339 0.126958294 0.131746105 0.134877012 0.135650437 0.142727073 0.143518973 0.146946303 0.147278394 0.149596775 0.152124514 0.154695832 0.156005108 0.156637399 0.161324378 0.161739840 0.173330964 0.173910593 0.179469862 0.183956229 0.185123694 0.189079334 0.190110325 0.193908679 0.193947267 0.198341074 0.200123246 0.205085952 0.206871564 0.207190488 0.209784300 0.212797189 0.215842118 0.217586850 0.217920440 0.220561602 0.225020241 0.226223281 0.231952065 0.234902431 0.235421712 0.235790822 0.244529865 0.255855436 0.257176679 0.263291266 0.269777753 0.280290650 0.282878353 0.286183302 0.291478966 0.296455344 0.304212485 0.305625852 0.307224878 0.313939820 0.316443057 0.317329350 0.321975185 0.329514803 0.332512335 0.351711266 0.351953065 0.354803014 0.355673294 0.359899491 0.362740520 0.363422060 0.384277952 0.386002804 0.391628463 0.410466728 0.425384694 0.430224057 0.459258018 0.468607551 0.477540502 0.482831740 0.483548219 0.487441862 0.491020949 0.509146422 0.515163968 0.535142537 0.566163129 0.572819280 0.592068009 0.593521270 0.606278021 0.607823475 0.644534569 0.646584903 0.648840042 0.674238135 0.677718748 0.685069383 0.691516865 0.693338327 0.699541269 0.704356539 0.717184065 0.741177539 0.751216856 0.758733010 0.767603245 0.772469581 0.778756299 0.810499200 0.813514809 0.818790757 0.821614088 0.823174594 0.831439668 0.832990524 0.835816181 0.840995178 0.845358548 0.846849699 0.848650279 0.858868848 0.865392488 0.865821564 0.873544126 0.881996060 0.884488378 0.889453957 0.893556099 0.900640905 0.903858892 0.922811166 0.923557537 0.933665552 0.935193017 0.965490839 0.975687141 0.985682743 1.001048011 1.018024075 1.027422512 1.041429230 1.050533029 1.057352556 1.068377962 1.086554925 1.088561904 1.103739400 1.106238238 1.112270414 1.121321021 1.124162139 1.135516156 1.143254991 1.174203875 1.176657961 1.180989286 1.186306380 1.190454211 1.196114267 1.224058397 1.228049421 1.274227481 1.301327922 1.319186450 1.328068767 1.332657258 1.335025672 1.335864760 1.341742864 1.342853841 1.344894724 1.358937006 1.378451274 1.382855926 1.384110421 1.414683663 1.419648345 1.435498188 1.551447615 1.680199233 1.775653617</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">201</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.335853" y3="0.0392752" z3="-0.18686094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38013275" y3="0.16622759" z3="0.42643261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64071718" y3="0.43751553" z3="-0.33340571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72101678" y3="1.22665576" z3="-2.25429195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38365412" y3="0.42007831" z3="-1.17991697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72263728" y3="0.8342278" z3="-3.65633789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62430834" y3="1.73784233" z3="-3.12513915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36947371" y3="2.57826448" z3="-4.60243684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55309414" y3="1.23735855" z3="-4.36671347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48933934" y3="2.91310938" z3="-5.16016319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92419033" y3="-0.49630924" z3="-3.44228214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09513294" y3="0.0238624" z3="-1.00047893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40437814" y3="-1.11935453" z3="-2.0048653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93210376" y3="-0.99770739" z3="-1.83055007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11356935" y3="-2.44063151" z3="-1.85593477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13586263" y3="-3.60179197" z3="0.66170484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01194714" y3="-5.27357273" z3="-4.74456224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24035202" y3="-5.00848029" z3="-3.70869027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83733105" y3="-4.2993419" z3="-1.0939623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78608009" y3="-4.60572792" z3="-2.85644499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55819438" y3="-5.08297336" z3="-3.25325737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85757498" y3="-4.72250716" z3="-1.94183687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49952643" y3="-4.26640199" z3="-1.53263512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82080828" y3="-4.53799324" z3="-3.20128197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35800817" y3="-5.39357728" z3="-3.92844058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89545468" y3="-4.74806759" z3="-1.60105776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02523147" y3="-3.84486232" z3="0.22500976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16445743" y3="-3.63464139" z3="0.8724249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05181747" y3="-4.09844319" z3="0.43943461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15811208" y3="-3.50132607" z3="2.3395718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21408764" y3="-3.32534806" z3="5.13804022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35341835" y3="-3.70814706" z3="3.04334585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99028024" y3="-3.21278472" z3="3.06121518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01506835" y3="-3.1264157" z3="4.45029647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38105672" y3="-3.62144646" z3="4.43233275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26724786" y3="-3.94872807" z3="2.49542063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03066632" y3="-3.07899011" z3="2.55611758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08353213" y3="-2.9259323" z3="4.98978223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31883676" y3="-3.79370986" z3="4.96761615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2328595" y3="-3.26601638" z3="6.2298663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42169063" y3="-3.90732014" z3="-0.62854177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18381945" y3="-3.40937894" z3="-1.08225807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51479322" y3="0.23156748" z3="-4.70819034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08120184" y3="-1.70813655" z3="0.02029878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89437288" y3="-0.95559968" z3="1.1788899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82933841" y3="-0.304255" z3="1.49972953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35627023" y3="0.56980968" z3="1.19779305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42583925" y3="1.45017072" z3="-0.43930089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99376745" y3="-0.68487263" z3="1.39932319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35166618" y3="1.78256703" z3="2.62578743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86011279" y3="-0.94449648" z3="2.08659806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61665154" y3="-0.33378547" z3="3.34404628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19702895" y3="0.74806296" z3="-1.25867403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3608349" y3="2.22884103" z3="-0.44543638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39882125" y3="1.94493905" z3="-0.60413462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01205094" y3="-1.04346587" z3="2.44204245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96913043" y3="-0.22517615" z3="1.1667776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87343116" y3="-1.53028537" z3="0.7026796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40877047" y3="1.25796323" z3="3.595884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58185284" y3="2.37388496" z3="2.61783256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.196208" y3="2.49133407" z3="2.56261164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75109983" y3="-0.79448615" z3="3.84682031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52612255" y3="-0.50581946" z3="3.93476297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44364637" y3="0.74795614" z3="3.22414147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83834761" y3="-0.71983278" z3="0.99515583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40772326" y3="-2.04515967" z3="0.8540797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75616485" y3="-2.69183659" z3="1.89691283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55195289" y3="-2.00027547" z3="3.08719581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03586714" y3="-0.71045828" z3="3.28501392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68741229" y3="-0.0772506" z3="2.23132589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50884879" y3="-2.54101977" z3="-0.11306167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35689628" y3="-3.69915074" z3="1.77216014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69249704" y3="-2.60014001" z3="4.11272572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85789217" y3="-0.20230513" z3="4.23338103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03440202" y3="0.95316643" z3="2.34893459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80422266" y3="0.45403726" z3="-4.29000453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78469858" y3="-0.51229325" z3="-4.47407027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43496195" y3="-1.70509421" z3="-5.09543187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14603974" y3="-1.93789229" z3="-5.56512902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82675812" y3="-0.9686549" z3="-5.36388195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05014502" y3="1.37819107" z3="-3.76156079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8053927" y3="-0.36438321" z3="-4.12042716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44763766" y3="-2.7526641" z3="-5.23940222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08543583" y3="-2.87925037" z3="-6.06372674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84969797" y3="-1.15625197" z3="-5.69364325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36576564" y3="-1.90656634" z3="5.05656714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31608267" y3="-3.74114465" z3="3.94490728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22250134" y3="-3.65500245" z3="-6.01695626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45250529" y3="-2.66579878" z3="-4.56171181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06342224" y3="1.16410908" z3="-1.47967808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10260837" y3="1.55089793" z3="-2.45889898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4308218" y3="1.50186839" z3="-1.67363496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83931663" y3="2.17348601" z3="-2.7998099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15718418" y3="1.20563169" z3="-0.91049887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8947977" y3="2.42282612" z3="-2.94083229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5614203" y3="2.22720009" z3="-3.62365691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89177351" y3="2.52948078" z3="-3.78937008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8400399" y3="2.49798954" z3="-4.39814324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22217088" y3="3.04315642" z3="-4.69660356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38779586" y3="3.14183628" z3="-3.31517824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2714989" y3="3.55331793" z3="-4.10134672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19051185" y3="4.15353713" z3="-2.71557976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93459347" y3="5.4861349" z3="-2.93324844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02012971" y3="3.86499817" z3="-2.06821908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56839607" y3="6.24165946" z3="-2.46094913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04039926" y3="4.939817" z3="-4.31949082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85651153" y3="5.88942511" z3="-3.75647285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18775146" y3="5.23704812" z3="-4.93795608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66761127" y3="6.95298051" z3="-3.92827707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4823788" y3="-2.18586143" z3="-0.28504266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46015409" y3="-2.9823608" z3="-1.04829917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00448465" y3="-2.5629483" z3="0.60899558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09924813" y3="-1.36732522" z3="-0.70209029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18760063" y3="-1.41435031" z3="-1.15834482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32429926" y3="-0.37337739" z3="-1.50495385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10863576" y3="-1.54432254" z3="-0.96341262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43776896" y3="-2.06836337" z3="-2.00694653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3359,.0393,-.1869;7.3801,.1662,.4264;6.6407,.4375,-.3334;4.721,1.2267,-2.2543;4.3837,.4201,-1.1799;2.7226,.8342,-3.6563;3.6243,1.7378,-3.1251;1.3695,2.5783,-4.6024;1.5531,1.2374,-4.3667;.4893,2.9131,-5.1602;2.9242,-.4963,-3.4423;3.0951,.0239,-1.0005;2.4044,-1.1194,-2.0049;.9321,-.9977,-1.8306;3.1136,-2.4406,-1.8559;-.1359,-3.6018,.6617;-.0119,-5.2736,-4.7446;-.2404,-5.0085,-3.7087;-.8373,-4.2993,-1.094;.7861,-4.6057,-2.8564;-1.5582,-5.083,-3.2533;-1.8576,-4.7225,-1.9418;.4995,-4.2664,-1.5326;1.8208,-4.538,-3.2013;-2.358,-5.3936,-3.9284;-2.8955,-4.7481,-1.6011;-1.0252,-3.8449,.225;-2.1645,-3.6346,.8724;-3.0518,-4.0984,.4394;-2.1581,-3.5013,2.3396;-2.2141,-3.3253,5.138;-3.3534,-3.7081,3.0433;-.9903,-3.2128,3.0612;-1.0151,-3.1264,4.4503;-3.3811,-3.6214,4.4323;-4.2672,-3.9487,2.4954;-.0307,-3.079,2.5561;-.0835,-2.9259,4.9898;-4.3188,-3.7937,4.9676;-2.2329,-3.266,6.2299;1.4217,-3.9073,-.6285;2.1838,-3.4094,-1.0823;.5148,.2316,-4.7082;-3.0812,-1.7081,.0203;-2.8944,-.9556,1.1789;-1.8293,-.3043,1.4997;-.3563,.5698,1.1978;-.4258,1.4502,-.4393;.9938,-.6849,1.3993;-.3517,1.7826,2.6258;-3.8601,-.9445,2.0866;-3.6167,-.3338,3.344;-.197,.7481,-1.2587;.3608,2.2288,-.4454;-1.3988,1.9449,-.6041;1.0121,-1.0435,2.442;1.9691,-.2252,1.1668;.8734,-1.5303,.7027;-.4088,1.258,3.5959;.5819,2.3739,2.6178;-1.1962,2.4913,2.5626;-2.7511,-.7945,3.8468;-4.5261,-.5058,3.9348;-3.4436,.748,3.2241;4.8383,-.7198,.9952;4.4077,-2.0452,.8541;3.7562,-2.6918,1.8969;3.552,-2.0003,3.0872;4.0359,-.7105,3.285;4.6874,-.0773,2.2313;4.5088,-2.541,-.1131;3.3569,-3.6992,1.7722;2.6925,-2.6001,4.1127;3.8579,-.2023,4.2334;5.0344,.9532,2.3489;-.8042,.454,-4.29;-1.7847,-.5123,-4.4741;-1.435,-1.7051,-5.0954;-.146,-1.9379,-5.5651;.8268,-.9687,-5.3639;-1.0501,1.3782,-3.7616;-2.8054,-.3644,-4.1204;-2.4476,-2.7527,-5.2394;.0854,-2.8793,-6.0637;1.8497,-1.1563,-5.6936;2.3658,-1.9066,5.0566;2.3161,-3.7411,3.9449;-2.2225,-3.655,-6.017;-3.4525,-2.6658,-4.5617;7.0634,1.1641,-1.4797;6.1026,1.5509,-2.4589;8.4308,1.5019,-1.6736;8.8393,2.1735,-2.7998;9.1572,1.2056,-.9105;9.8948,2.4228,-2.9408;6.5614,2.2272,-3.6237;7.8918,2.5295,-3.7894;5.84,2.498,-4.3981;8.2222,3.0432,-4.6966;3.3878,3.1418,-3.3152;2.2715,3.5533,-4.1013;4.1905,4.1535,-2.7156;3.9346,5.4861,-2.9332;5.0201,3.865,-2.0682;4.5684,6.2417,-2.4609;2.0404,4.9398,-4.3195;2.8565,5.8894,-3.7565;1.1878,5.237,-4.938;2.6676,6.953,-3.9283;-4.4824,-2.1859,-.285;-4.4602,-2.9824,-1.0483;-5.0045,-2.5629,.609;-5.0992,-1.3673,-.7021;-2.1876,-1.4144,-1.1583;-2.3243,-.3734,-1.505;-1.1086,-1.5443,-.9634;-2.4378,-2.0684,-2.0069;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650408343852</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001965159803 0.000346765538 0.018085217353 0.005345085258</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030620626 -0.000773822 0.000079079 0.000184547 0.000210267 0.000293688 0.000411499 0.000437258 0.000592967 0.000788327 0.000935347 0.001042506 0.001260994 0.001308079 0.001351824 0.001402849 0.001661584 0.001784102 0.001829431 0.001932818 0.002165179 0.002518700 0.002551675 0.002705162 0.002846764 0.003056197 0.003257539 0.003454472 0.003875932 0.003961670 0.004394616 0.004779902 0.004835720 0.005079706 0.005928041 0.006057442 0.006297423 0.006614627 0.006838857 0.007582641 0.008036825 0.008186370 0.009224526 0.009552857 0.009984554 0.010699273 0.011046488 0.011616540 0.011675890 0.012200295 0.012859840 0.013183483 0.014001724 0.014400392 0.015013741 0.015363251 0.015671062 0.016165851 0.016695054 0.016994745 0.017443521 0.017960834 0.019223961 0.019426556 0.019873026 0.020808006 0.021213198 0.021410891 0.022427057 0.023120094 0.025142629 0.025949124 0.026712585 0.026961154 0.027445278 0.029227997 0.029404459 0.031407126 0.033259450 0.033491413 0.033869036 0.035797562 0.036812281 0.037505940 0.039490545 0.039974983 0.040750677 0.042069744 0.043523280 0.044393559 0.045282419 0.046778487 0.047638307 0.049179337 0.050289347 0.050802557 0.051032067 0.051223116 0.052477558 0.052576010 0.052859070 0.052958996 0.054569059 0.054713524 0.055483843 0.056185685 0.056491346 0.056500040 0.057026026 0.058388955 0.060280502 0.060676302 0.061603482 0.062063946 0.063158469 0.064373845 0.065105699 0.065794057 0.066334030 0.067775727 0.068914672 0.070182606 0.072671173 0.074391789 0.074467937 0.076163369 0.077838576 0.083580871 0.085172232 0.086881489 0.087233350 0.088001807 0.090375453 0.090878204 0.092979698 0.094596400 0.095238090 0.096314600 0.097315741 0.097883343 0.098866250 0.099880676 0.100258126 0.102341706 0.102823164 0.103271106 0.103444006 0.103942212 0.105676680 0.106834078 0.107344726 0.109555266 0.110539767 0.111567711 0.112483631 0.113280657 0.114881570 0.116036381 0.116333944 0.119061177 0.120735357 0.121919304 0.122834621 0.124421373 0.125512334 0.126247524 0.126958047 0.131746001 0.134882659 0.135665241 0.142726644 0.143519113 0.146947958 0.147278412 0.149599080 0.152153498 0.154699284 0.156005699 0.156636543 0.161329540 0.161739798 0.173335072 0.173915200 0.179514038 0.183956252 0.185141548 0.189105394 0.190112991 0.193909905 0.193953432 0.198341050 0.200123935 0.205087539 0.206873686 0.207205942 0.209804909 0.212985920 0.215913909 0.217592946 0.217953315 0.220566902 0.225023328 0.226223363 0.231952253 0.234908962 0.235425248 0.235793010 0.244533420 0.255870611 0.257176714 0.263323187 0.269777738 0.280293289 0.282878356 0.286185293 0.291479801 0.296488561 0.304214494 0.305630585 0.307226444 0.313939813 0.316445628 0.317329343 0.321978393 0.329546057 0.332519012 0.351715890 0.351963031 0.354807344 0.355677784 0.359908074 0.362741123 0.363454158 0.384283516 0.386002966 0.391634494 0.410481754 0.425384678 0.430227266 0.459543837 0.468609304 0.477557095 0.482831762 0.483548839 0.487441840 0.491052292 0.509146575 0.515165981 0.535142917 0.566164587 0.572829119 0.592097280 0.593521517 0.606282637 0.607845012 0.644544364 0.646596839 0.648840259 0.674239840 0.677721564 0.685069347 0.691517309 0.693346073 0.699567952 0.704357893 0.717189820 0.741178201 0.751217067 0.758758361 0.767659869 0.772477254 0.778757980 0.810500363 0.813573580 0.818803693 0.821615510 0.823193242 0.831439954 0.833085776 0.835830102 0.841074948 0.845373398 0.846852803 0.848650652 0.858878584 0.865481487 0.865825870 0.873596424 0.882093060 0.884502187 0.889464176 0.893624862 0.900660497 0.903859960 0.922832718 0.923562384 0.933668235 0.935206296 0.965503357 0.975691882 0.985715624 1.001055953 1.018102926 1.027449420 1.041444276 1.050575499 1.057375216 1.068385747 1.086556908 1.088561955 1.103827473 1.106243061 1.112270482 1.121590952 1.124179150 1.135537037 1.143275551 1.174211110 1.176763940 1.180992610 1.186306501 1.190462379 1.196119857 1.224064964 1.228059065 1.274227910 1.301355769 1.319217811 1.328068625 1.332657360 1.335045362 1.335876225 1.341797673 1.342862970 1.344896245 1.358937056 1.378461089 1.382857665 1.384115491 1.414726302 1.419669914 1.435567150 1.551449528 1.680302342 1.775658895</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">202</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33660769" y3="0.03397621" z3="-0.1868478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38100184" y3="0.16356267" z3="0.4251003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64075773" y3="0.43505502" z3="-0.33369936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71857816" y3="1.22421784" z3="-2.25183785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38333559" y3="0.41476056" z3="-1.17880257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71963311" y3="0.83115054" z3="-3.65316242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62018505" y3="1.73515587" z3="-3.12061323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36218762" y3="2.57653841" z3="-4.59274806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5492707" y3="1.23387631" z3="-4.36234547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48164863" y3="2.91112446" z3="-5.14994442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92366224" y3="-0.49962688" z3="-3.44195094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09563319" y3="0.01603893" z3="-0.99927086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40567922" y3="-1.12631198" z3="-2.00522633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93337176" y3="-1.00675095" z3="-1.82926697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1160167" y3="-2.44720743" z3="-1.85903692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13396389" y3="-3.5972845" z3="0.65792313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01082863" y3="-5.28246088" z3="-4.74439981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23926763" y3="-5.01439565" z3="-3.70929939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83603686" y3="-4.2978644" z3="-1.09623764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78789812" y3="-4.61399235" z3="-2.85680834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5576863" y3="-5.08334586" z3="-3.25466762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85696846" y3="-4.71905181" z3="-1.94423994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50153452" y3="-4.27133364" z3="-1.53384355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82277458" y3="-4.54972322" z3="-3.20047858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35921463" y3="-5.39131996" z3="-3.92996817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89521974" y3="-4.74030562" z3="-1.60453523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02358131" y3="-3.8403736" z3="0.22173446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16248737" y3="-3.63029333" z3="0.86955243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05010582" y3="-4.09413468" z3="0.43683092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15569204" y3="-3.49660011" z3="2.33666067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21160893" y3="-3.31871042" z3="5.13504393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35218698" y3="-3.7003032" z3="3.04024063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98720032" y3="-3.20939198" z3="3.05833826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01315593" y3="-3.12041024" z3="4.4470968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37890848" y3="-3.6139692" z3="4.42940959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27003448" y3="-3.93447471" z3="2.49158014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02808522" y3="-3.07588949" z3="2.55327854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08566977" y3="-2.91434208" z3="4.98601965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31716471" y3="-3.78431781" z3="4.9645202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23110428" y3="-3.25719704" z3="6.22664995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42581378" y3="-3.91553421" z3="-0.62967706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18617131" y3="-3.41719618" z3="-1.08330433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51228885" y3="0.2273035" z3="-4.7066794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07999093" y3="-1.70413" z3="0.01644954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89047829" y3="-0.95105345" z3="1.17423432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82450519" y3="-0.30116163" z3="1.49338792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35103118" y3="0.57343689" z3="1.19348021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41579484" y3="1.44854133" z3="-0.44670018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99926519" y3="-0.67960123" z3="1.40241056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35134996" y3="1.79035842" z3="2.61769554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85506604" y3="-0.93780091" z3="2.08339583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60905585" y3="-0.32601407" z3="3.33970211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18952617" y3="0.74254815" z3="-1.26430162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36986684" y3="2.22607205" z3="-0.454341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.3881398" y3="1.94612162" z3="-0.61324152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01412784" y3="-1.03718983" z3="2.44554697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97552104" y3="-0.22001041" z3="1.17265816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88149045" y3="-1.52572084" z3="0.70600641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41179704" y3="1.2686526" z3="3.58930055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58329202" y3="2.38070808" z3="2.61055929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19517863" y3="2.50030211" z3="2.54968541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74282747" y3="-0.78638098" z3="3.84126955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5174863" y3="-0.49675495" z3="3.93270055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43495592" y3="0.7557369" z3="3.21857937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84066388" y3="-0.72599566" z3="0.9952791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40714638" y3="-2.05030359" z3="0.85383464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75616719" y3="-2.69647075" z3="1.89734569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55614974" y3="-2.00562335" z3="3.08915495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04287715" y3="-0.71704328" z3="3.28697666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6933153" y3="-0.08426373" z3="2.23231942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50573309" y3="-2.54570423" z3="-0.11369621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35391148" y3="-3.70271128" z3="1.77179257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69609622" y3="-2.60430663" z3="4.11482088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86743173" y3="-0.20928005" z3="4.23596692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04178216" y3="0.94541242" z3="2.34970279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80787331" y3="0.44876288" z3="-4.29206535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78703004" y3="-0.51796869" z3="-4.47498895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43613149" y3="-1.71033284" z3="-5.09792286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14696424" y3="-1.94271597" z3="-5.56734951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82552938" y3="-0.97206448" z3="-5.35832781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05653054" y3="1.37265621" z3="-3.76287148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80793755" y3="-0.37069609" z3="-4.12144215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44795901" y3="-2.75860414" z3="-5.24445185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08621095" y3="-2.88346357" z3="-6.06640366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84944553" y3="-1.15877552" z3="-5.68677979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37128655" y3="-1.91049568" z3="5.05834302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31549561" y3="-3.74429838" z3="3.94567406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22060006" y3="-3.66036858" z3="-6.02257124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45401139" y3="-2.67246062" z3="-4.56861281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06150871" y3="1.16439852" z3="-1.47911573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09935728" y3="1.55127155" z3="-2.45696428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42810429" y3="1.50445799" z3="-1.67354564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83471764" y3="2.17865509" z3="-2.79882433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15547321" y3="1.20807877" z3="-0.91145046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88959374" y3="2.42971186" z3="-2.94022748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55612031" y3="2.23016827" z3="-3.62084222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88582964" y3="2.53479134" z3="-3.78702954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83383653" y3="2.5013434" z3="-4.39432695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21470561" y3="3.0506926" z3="-4.69359596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38128419" y3="3.13891401" z3="-3.30731905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26321383" y3="3.55102164" z3="-4.09081935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18308203" y3="4.14993542" z3="-2.705967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92376587" y3="5.48337125" z3="-2.91853131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0131114" y3="3.86128421" z3="-2.05931835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55542323" y3="6.23965902" z3="-2.44286391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03039637" y3="4.93703389" z3="-4.30620592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84510623" y3="5.88644473" z3="-3.74094218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17732807" y3="5.23413906" z3="-4.92400888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6548632" y3="6.94972601" z3="-3.91029341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48228669" y3="-2.18055734" z3="-0.28621393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46242128" y3="-2.97691214" z3="-1.04968805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00277924" y3="-2.55714141" z3="0.60887339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09970145" y3="-1.36158633" z3="-0.70198236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1873374" y3="-1.41281356" z3="-1.16345856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32486331" y3="-0.37210465" z3="-1.51107952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11015399" y3="-1.53982287" z3="-0.96804549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43907775" y3="-2.06768497" z3="-2.01154506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3366,.034,-.1868;7.381,.1636,.4251;6.6408,.4351,-.3337;4.7186,1.2242,-2.2518;4.3833,.4148,-1.1788;2.7196,.8312,-3.6532;3.6202,1.7352,-3.1206;1.3622,2.5765,-4.5927;1.5493,1.2339,-4.3623;.4816,2.9111,-5.1499;2.9237,-.4996,-3.442;3.0956,.016,-.9993;2.4057,-1.1263,-2.0052;.9334,-1.0068,-1.8293;3.116,-2.4472,-1.859;-.134,-3.5973,.6579;-.0108,-5.2825,-4.7444;-.2393,-5.0144,-3.7093;-.836,-4.2979,-1.0962;.7879,-4.614,-2.8568;-1.5577,-5.0833,-3.2547;-1.857,-4.7191,-1.9442;.5015,-4.2713,-1.5338;1.8228,-4.5497,-3.2005;-2.3592,-5.3913,-3.93;-2.8952,-4.7403,-1.6045;-1.0236,-3.8404,.2217;-2.1625,-3.6303,.8696;-3.0501,-4.0941,.4368;-2.1557,-3.4966,2.3367;-2.2116,-3.3187,5.135;-3.3522,-3.7003,3.0402;-.9872,-3.2094,3.0583;-1.0132,-3.1204,4.4471;-3.3789,-3.614,4.4294;-4.27,-3.9345,2.4916;-.0281,-3.0759,2.5533;-.0857,-2.9143,4.986;-4.3172,-3.7843,4.9645;-2.2311,-3.2572,6.2266;1.4258,-3.9155,-.6297;2.1862,-3.4172,-1.0833;.5123,.2273,-4.7067;-3.08,-1.7041,.0164;-2.8905,-.9511,1.1742;-1.8245,-.3012,1.4934;-.351,.5734,1.1935;-.4158,1.4485,-.4467;.9993,-.6796,1.4024;-.3513,1.7904,2.6177;-3.8551,-.9378,2.0834;-3.6091,-.326,3.3397;-.1895,.7425,-1.2643;.3699,2.2261,-.4543;-1.3881,1.9461,-.6132;1.0141,-1.0372,2.4455;1.9755,-.22,1.1727;.8815,-1.5257,.706;-.4118,1.2687,3.5893;.5833,2.3807,2.6106;-1.1952,2.5003,2.5497;-2.7428,-.7864,3.8413;-4.5175,-.4968,3.9327;-3.435,.7557,3.2186;4.8407,-.726,.9953;4.4071,-2.0503,.8538;3.7562,-2.6965,1.8973;3.5561,-2.0056,3.0892;4.0429,-.717,3.287;4.6933,-.0843,2.2323;4.5057,-2.5457,-.1137;3.3539,-3.7027,1.7718;2.6961,-2.6043,4.1148;3.8674,-.2093,4.236;5.0418,.9454,2.3497;-.8079,.4488,-4.2921;-1.787,-.518,-4.475;-1.4361,-1.7103,-5.0979;-.147,-1.9427,-5.5673;.8255,-.9721,-5.3583;-1.0565,1.3727,-3.7629;-2.8079,-.3707,-4.1214;-2.448,-2.7586,-5.2445;.0862,-2.8835,-6.0664;1.8494,-1.1588,-5.6868;2.3713,-1.9105,5.0583;2.3155,-3.7443,3.9457;-2.2206,-3.6604,-6.0226;-3.454,-2.6725,-4.5686;7.0615,1.1644,-1.4791;6.0994,1.5513,-2.457;8.4281,1.5045,-1.6735;8.8347,2.1787,-2.7988;9.1555,1.2081,-.9115;9.8896,2.4297,-2.9402;6.5561,2.2302,-3.6208;7.8858,2.5348,-3.787;5.8338,2.5013,-4.3943;8.2147,3.0507,-4.6936;3.3813,3.1389,-3.3073;2.2632,3.551,-4.0908;4.1831,4.1499,-2.706;3.9238,5.4834,-2.9185;5.0131,3.8613,-2.0593;4.5554,6.2397,-2.4429;2.0304,4.937,-4.3062;2.8451,5.8864,-3.7409;1.1773,5.2341,-4.924;2.6549,6.9497,-3.9103;-4.4823,-2.1806,-.2862;-4.4624,-2.9769,-1.0497;-5.0028,-2.5571,.6089;-5.0997,-1.3616,-.702;-2.1873,-1.4128,-1.1635;-2.3249,-.3721,-1.5111;-1.1102,-1.5398,-.968;-2.4391,-2.0677,-2.0115;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650402760852</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002045220369 0.000365699623 0.020352652260 0.005333354598</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030621276 -0.000830671 0.000081240 0.000177678 0.000209417 0.000293482 0.000411037 0.000437505 0.000593126 0.000787136 0.000936135 0.001048872 0.001261013 0.001308494 0.001353240 0.001402714 0.001661681 0.001785025 0.001834563 0.001938033 0.002165272 0.002518738 0.002553447 0.002704718 0.002846715 0.003055808 0.003258382 0.003454422 0.003875817 0.003962146 0.004394571 0.004779988 0.004836486 0.005079564 0.005929091 0.006057375 0.006302705 0.006619197 0.006839341 0.007582592 0.008037497 0.008187845 0.009225987 0.009552869 0.009988889 0.010699276 0.011047319 0.011620692 0.011676569 0.012203744 0.012859781 0.013186405 0.014005999 0.014400392 0.015014338 0.015364128 0.015680089 0.016188614 0.016779064 0.017100164 0.017450385 0.017972119 0.019286210 0.019428464 0.019890065 0.020808514 0.021213262 0.021417601 0.022427714 0.023121065 0.025143120 0.025949434 0.026716145 0.026965205 0.027445111 0.029239016 0.029418184 0.031407168 0.033260566 0.033495421 0.033869597 0.035798707 0.036812353 0.037523573 0.039512104 0.039979942 0.040750576 0.042083325 0.043632976 0.044400582 0.045281784 0.046802927 0.047646952 0.049179470 0.050290278 0.050802566 0.051033594 0.051224458 0.052477546 0.052576444 0.052861690 0.052959508 0.054598104 0.054713609 0.055496549 0.056190002 0.056493600 0.056501254 0.057026428 0.058389728 0.060286612 0.060680399 0.061603895 0.062065365 0.063164862 0.064374493 0.065106649 0.065794235 0.066334003 0.067776548 0.068914175 0.070183855 0.072671445 0.074421570 0.074468329 0.076167461 0.077847620 0.083588074 0.085174388 0.086881820 0.087234049 0.088010594 0.090382581 0.090891757 0.092979834 0.094597117 0.095238459 0.096314595 0.097317937 0.097883602 0.098869602 0.099888621 0.100263007 0.102343338 0.102827647 0.103277455 0.103443956 0.103941983 0.105685157 0.106840716 0.107350592 0.109558990 0.110539822 0.111567954 0.112485959 0.113282892 0.114914066 0.116121488 0.116414500 0.119070698 0.120746753 0.121925923 0.122854385 0.124463730 0.125512290 0.126247879 0.126958324 0.131746450 0.134892374 0.135670309 0.142726183 0.143519692 0.146948115 0.147278318 0.149604440 0.152186808 0.154703235 0.156005725 0.156635383 0.161339437 0.161741875 0.173336845 0.173921570 0.179573308 0.183958088 0.185168689 0.189145868 0.190123088 0.193914096 0.193958973 0.198341160 0.200123839 0.205089425 0.206875471 0.207219186 0.209840366 0.213224674 0.215998788 0.217596644 0.217997468 0.220575304 0.225031626 0.226223494 0.231952290 0.234924571 0.235427093 0.235793401 0.244537821 0.255888303 0.257176786 0.263352749 0.269777731 0.280298905 0.282878480 0.286189826 0.291482722 0.296527469 0.304216810 0.305634845 0.307226605 0.313940630 0.316450575 0.317329433 0.321980793 0.329582477 0.332532175 0.351719808 0.351976907 0.354811481 0.355683753 0.359916591 0.362743476 0.363495866 0.384287198 0.386003467 0.391645046 0.410505802 0.425384697 0.430229991 0.459903499 0.468610443 0.477577632 0.482832363 0.483552537 0.487441793 0.491078908 0.509148142 0.515167814 0.535143220 0.566165046 0.572834636 0.592129328 0.593526347 0.606291320 0.607862688 0.644552877 0.646618091 0.648840427 0.674243340 0.677726718 0.685070042 0.691517405 0.693357463 0.699578867 0.704361166 0.717198823 0.741180826 0.751217267 0.758787801 0.767734539 0.772485670 0.778759830 0.810501434 0.813610114 0.818814350 0.821617306 0.823223717 0.831439967 0.833175961 0.835842171 0.841164223 0.845391779 0.846858960 0.848655741 0.858890443 0.865556116 0.865836719 0.873661996 0.882272224 0.884509382 0.889465845 0.893676198 0.900678508 0.903860616 0.922843836 0.923566206 0.933674675 0.935222836 0.965530416 0.975697628 0.985761208 1.001065831 1.018168625 1.027500151 1.041469640 1.050610214 1.057392097 1.068396955 1.086559499 1.088562735 1.103939629 1.106247354 1.112270737 1.121901149 1.124210447 1.135570386 1.143307240 1.174217491 1.176885889 1.180996005 1.186308034 1.190471398 1.196123666 1.224066748 1.228063361 1.274228855 1.301373883 1.319261166 1.328071688 1.332658753 1.335084246 1.335879999 1.341838306 1.342880557 1.344896486 1.358937767 1.378484254 1.382859354 1.384116090 1.414771778 1.419680397 1.435642561 1.551453022 1.680439350 1.775664570</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">203</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33977407" y3="0.02962007" z3="-0.18685894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3847997" y3="0.1620625" z3="0.42286901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64302325" y3="0.43278964" z3="-0.33486416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71695805" y3="1.2212318" z3="-2.24946992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38455064" y3="0.40999335" z3="-1.17723979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71671428" y3="0.82792494" z3="-3.6486939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61653178" y3="1.73220594" z3="-3.11563581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35646202" y3="2.57174077" z3="-4.58505187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54488249" y3="1.23030512" z3="-4.35576485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47471106" y3="2.90638689" z3="-5.14035897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92275691" y3="-0.50282032" z3="-3.43980101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09770723" y3="0.00929955" z3="-0.99667559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40720534" y3="-1.13186086" z3="-2.0034307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9350806" y3="-1.01276512" z3="-1.82543247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11812049" y3="-2.45272522" z3="-1.86015454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13332095" y3="-3.59682203" z3="0.65578122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01260539" y3="-5.28814849" z3="-4.7446165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24060173" y3="-5.01892105" z3="-3.70976647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83620535" y3="-4.29889561" z3="-1.0975792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78720423" y3="-4.61995043" z3="-2.85728516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55919185" y3="-5.08474042" z3="-3.25555598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85772105" y3="-4.71894188" z3="-1.94546619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50116249" y3="-4.27513938" z3="-1.53478954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82279525" y3="-4.559624" z3="-3.20100469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36039489" y3="-5.39247034" z3="-3.93069637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89614311" y3="-4.73729921" z3="-1.60592847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02332704" y3="-3.83931556" z3="0.21980611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16218943" y3="-3.62648652" z3="0.86718796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05017561" y3="-4.09030665" z3="0.43528627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15570012" y3="-3.48993115" z3="2.33401534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21190976" y3="-3.30686084" z3="5.13205944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35178152" y3="-3.69193673" z3="3.0380177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98728402" y3="-3.20255545" z3="3.05522226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01225651" y3="-3.11262801" z3="4.44411119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37957506" y3="-3.60173889" z3="4.42675354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26564056" y3="-3.93194135" z3="2.49046316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02756992" y3="-3.07178177" z3="2.55010769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08012778" y3="-2.91359488" z3="4.98358994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31784451" y3="-3.77045192" z3="4.96222487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23059635" y3="-3.24489005" z3="6.223777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42489499" y3="-3.91943182" z3="-0.63091163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18770792" y3="-3.42370916" z3="-1.08507272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50964437" y3="0.22301047" z3="-4.70196923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07750893" y3="-1.70022881" z3="0.01264869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88677288" y3="-0.94641633" z3="1.16965501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81823192" y3="-0.30001853" z3="1.48829604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34624042" y3="0.57695015" z3="1.19091364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41001757" y3="1.44859351" z3="-0.45073197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00473923" y3="-0.67462494" z3="1.40649652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35160935" y3="1.79701587" z3="2.6128757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85167275" y3="-0.92966046" z3="2.07818176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6057883" y3="-0.31594491" z3="3.33329858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18219193" y3="0.74153126" z3="-1.26599115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37853798" y3="2.22541079" z3="-0.45973615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38180503" y3="1.94467519" z3="-0.61960162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01591501" y3="-1.03060051" z3="2.45030097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98170313" y3="-0.21511674" z3="1.17943352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88980772" y3="-1.52198818" z3="0.71129971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41602974" y3="1.27715488" z3="3.5852299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58218946" y3="2.38792283" z3="2.60871858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19545258" y3="2.50586699" z3="2.53997726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74237501" y3="-0.77864646" z3="3.83752446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51606923" y3="-0.48231903" z3="3.92435275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42785987" y3="0.76507273" z3="3.21010317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84560973" y3="-0.73170765" z3="0.9950909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40880608" y3="-2.05488375" z3="0.85237828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75696847" y3="-2.70083454" z3="1.89544464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55891205" y3="-2.01094023" z3="3.08755714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05046451" y3="-0.72423005" z3="3.28740227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70195767" y3="-0.09160796" z3="2.23336734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50524486" y3="-2.54925957" z3="-0.11585285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35276294" y3="-3.70596663" z3="1.76963185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69851704" y3="-2.60860606" z3="4.11355963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87811007" y3="-0.21753183" z3="4.23764155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05424717" y3="0.93694307" z3="2.35242161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81135006" y3="0.44309777" z3="-4.28928102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78993422" y3="-0.52425111" z3="-4.47979862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43593163" y3="-1.71553622" z3="-5.10139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14475442" y3="-1.94596927" z3="-5.56568316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8258793" y3="-0.97578355" z3="-5.35879895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06113644" y3="1.36600633" z3="-3.75991357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81222584" y3="-0.37808378" z3="-4.13034165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44673871" y3="-2.76459392" z3="-5.2516523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08971365" y3="-2.88617166" z3="-6.06481892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85027964" y3="-1.16165815" z3="-5.68452433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37842128" y3="-1.91563775" z3="5.06021921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31486877" y3="-3.74695553" z3="3.94350781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21682614" y3="-3.66590955" z3="-6.02899498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45478611" y3="-2.67971213" z3="-4.57833967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06098043" y3="1.16389412" z3="-1.47993033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09682945" y3="1.55070754" z3="-2.45588989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42674503" y3="1.50674008" z3="-1.67566523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83054192" y3="2.18374844" z3="-2.80030458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1557513" y3="1.2103862" z3="-0.91509445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88479116" y3="2.436826" z3="-2.9427458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55070757" y3="2.23273842" z3="-3.61911167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87969633" y3="2.54026055" z3="-3.7865001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82676443" y3="2.50395412" z3="-4.39106849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20640086" y3="3.05869261" z3="-4.69245425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37475473" y3="3.13621274" z3="-3.29844286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25548106" y3="3.54756556" z3="-4.08043407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17491113" y3="4.14768521" z3="-2.69518306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91332593" y3="5.48046817" z3="-2.90517307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00687239" y3="3.85877546" z3="-2.05094901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54514203" y3="6.23579483" z3="-2.43013963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01856725" y3="4.93443073" z3="-4.29074128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83211619" y3="5.88399849" z3="-3.7242478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16380336" y3="5.23165769" z3="-4.90628329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63867741" y3="6.94774576" z3="-3.88994076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48009195" y3="-2.17484242" z3="-0.28998317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46092894" y3="-2.9734628" z3="-1.05115131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00236539" y3="-2.54829369" z3="0.60549969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09504021" y3="-1.35562416" z3="-0.70838779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18481057" y3="-1.41064435" z3="-1.16741489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32171369" y3="-0.37061228" z3="-1.51702427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10616308" y3="-1.53982533" z3="-0.97256871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43595413" y3="-2.0670427" z3="-2.01398472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0296,-.1869;7.3848,.1621,.4229;6.643,.4328,-.3349;4.717,1.2212,-2.2495;4.3846,.41,-1.1772;2.7167,.8279,-3.6487;3.6165,1.7322,-3.1156;1.3565,2.5717,-4.5851;1.5449,1.2303,-4.3558;.4747,2.9064,-5.1404;2.9228,-.5028,-3.4398;3.0977,.0093,-.9967;2.4072,-1.1319,-2.0034;.9351,-1.0128,-1.8254;3.1181,-2.4527,-1.8602;-.1333,-3.5968,.6558;-.0126,-5.2881,-4.7446;-.2406,-5.0189,-3.7098;-.8362,-4.2989,-1.0976;.7872,-4.62,-2.8573;-1.5592,-5.0847,-3.2556;-1.8577,-4.7189,-1.9455;.5012,-4.2751,-1.5348;1.8228,-4.5596,-3.201;-2.3604,-5.3925,-3.9307;-2.8961,-4.7373,-1.6059;-1.0233,-3.8393,.2198;-2.1622,-3.6265,.8672;-3.0502,-4.0903,.4353;-2.1557,-3.4899,2.334;-2.2119,-3.3069,5.1321;-3.3518,-3.6919,3.038;-.9873,-3.2026,3.0552;-1.0123,-3.1126,4.4441;-3.3796,-3.6017,4.4268;-4.2656,-3.9319,2.4905;-.0276,-3.0718,2.5501;-.0801,-2.9136,4.9836;-4.3178,-3.7705,4.9622;-2.2306,-3.2449,6.2238;1.4249,-3.9194,-.6309;2.1877,-3.4237,-1.0851;.5096,.223,-4.702;-3.0775,-1.7002,.0126;-2.8868,-.9464,1.1697;-1.8182,-.3,1.4883;-.3462,.577,1.1909;-.41,1.4486,-.4507;1.0047,-.6746,1.4065;-.3516,1.797,2.6129;-3.8517,-.9297,2.0782;-3.6058,-.3159,3.3333;-.1822,.7415,-1.266;.3785,2.2254,-.4597;-1.3818,1.9447,-.6196;1.0159,-1.0306,2.4503;1.9817,-.2151,1.1794;.8898,-1.522,.7113;-.416,1.2772,3.5852;.5822,2.3879,2.6087;-1.1955,2.5059,2.54;-2.7424,-.7786,3.8375;-4.5161,-.4823,3.9244;-3.4279,.7651,3.2101;4.8456,-.7317,.9951;4.4088,-2.0549,.8524;3.757,-2.7008,1.8954;3.5589,-2.0109,3.0876;4.0505,-.7242,3.2874;4.702,-.0916,2.2334;4.5052,-2.5493,-.1159;3.3528,-3.706,1.7696;2.6985,-2.6086,4.1136;3.8781,-.2175,4.2376;5.0542,.9369,2.3524;-.8114,.4431,-4.2893;-1.7899,-.5243,-4.4798;-1.4359,-1.7155,-5.1014;-.1448,-1.946,-5.5657;.8259,-.9758,-5.3588;-1.0611,1.366,-3.7599;-2.8122,-.3781,-4.1303;-2.4467,-2.7646,-5.2517;.0897,-2.8862,-6.0648;1.8503,-1.1617,-5.6845;2.3784,-1.9156,5.0602;2.3149,-3.747,3.9435;-2.2168,-3.6659,-6.029;-3.4548,-2.6797,-4.5783;7.061,1.1639,-1.4799;6.0968,1.5507,-2.4559;8.4267,1.5067,-1.6757;8.8305,2.1837,-2.8003;9.1558,1.2104,-.9151;9.8848,2.4368,-2.9427;6.5507,2.2327,-3.6191;7.8797,2.5403,-3.7865;5.8268,2.504,-4.3911;8.2064,3.0587,-4.6925;3.3748,3.1362,-3.2984;2.2555,3.5476,-4.0804;4.1749,4.1477,-2.6952;3.9133,5.4805,-2.9052;5.0069,3.8588,-2.0509;4.5451,6.2358,-2.4301;2.0186,4.9344,-4.2907;2.8321,5.884,-3.7242;1.1638,5.2317,-4.9063;2.6387,6.9477,-3.8899;-4.4801,-2.1748,-.29;-4.4609,-2.9735,-1.0512;-5.0024,-2.5483,.6055;-5.095,-1.3556,-.7084;-2.1848,-1.4106,-1.1674;-2.3217,-.3706,-1.517;-1.1062,-1.5398,-.9726;-2.436,-2.067,-2.014;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650398618842</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001942812339 0.000363646161 0.019576230832 0.005333783163</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030622568 -0.000766575 0.000080367 0.000164106 0.000208381 0.000289360 0.000411584 0.000436417 0.000593157 0.000787614 0.000936717 0.001049066 0.001263771 0.001308532 0.001356346 0.001402634 0.001661666 0.001788487 0.001835396 0.001941532 0.002165694 0.002518927 0.002556555 0.002705069 0.002846889 0.003055610 0.003260201 0.003454397 0.003876543 0.003962158 0.004396620 0.004779962 0.004836372 0.005079563 0.005929272 0.006057326 0.006302389 0.006621844 0.006839507 0.007582756 0.008038891 0.008195295 0.009226004 0.009553881 0.009989471 0.010699177 0.011049206 0.011621528 0.011678504 0.012208744 0.012859797 0.013186757 0.014008856 0.014402406 0.015014591 0.015364915 0.015684939 0.016200987 0.016819118 0.017209131 0.017472080 0.017988242 0.019341893 0.019436813 0.019906645 0.020808933 0.021213333 0.021420006 0.022428508 0.023122638 0.025145001 0.025949096 0.026719933 0.026970669 0.027445200 0.029248962 0.029432312 0.031407152 0.033261437 0.033499396 0.033870029 0.035801608 0.036812431 0.037542119 0.039537692 0.039983615 0.040751218 0.042102151 0.043763270 0.044412237 0.045283916 0.046819948 0.047650380 0.049180365 0.050291730 0.050802760 0.051034092 0.051226250 0.052477559 0.052577409 0.052864867 0.052960334 0.054623087 0.054713819 0.055513854 0.056194117 0.056494800 0.056502977 0.057026687 0.058391094 0.060291335 0.060686583 0.061603999 0.062068793 0.063168331 0.064375630 0.065107776 0.065796396 0.066334471 0.067778299 0.068914339 0.070185381 0.072671423 0.074446825 0.074472921 0.076169413 0.077856848 0.083595715 0.085177733 0.086881710 0.087234106 0.088019155 0.090391336 0.090904688 0.092979908 0.094597743 0.095238432 0.096314620 0.097318138 0.097884233 0.098872216 0.099891288 0.100265017 0.102345048 0.102828287 0.103287685 0.103444014 0.103942192 0.105691789 0.106844524 0.107362516 0.109560980 0.110540781 0.111568076 0.112491371 0.113282708 0.114928705 0.116167016 0.116515308 0.119077820 0.120754562 0.121937147 0.122876977 0.124499609 0.125512551 0.126247463 0.126958775 0.131747846 0.134911422 0.135670203 0.142726228 0.143521155 0.146948223 0.147278361 0.149609999 0.152227467 0.154707062 0.156005859 0.156634895 0.161354489 0.161749853 0.173337415 0.173930499 0.179628821 0.183964406 0.185200712 0.189193636 0.190136267 0.193919380 0.193967053 0.198341372 0.200123742 0.205091472 0.206877180 0.207228992 0.209887959 0.213447250 0.216095126 0.217598915 0.218054165 0.220588375 0.225043013 0.226223857 0.231953039 0.234946916 0.235427760 0.235793355 0.244544347 0.255904197 0.257176792 0.263380432 0.269777776 0.280306123 0.282879265 0.286195193 0.291488938 0.296569848 0.304218172 0.305638480 0.307226552 0.313942100 0.316458117 0.317329701 0.321983239 0.329619073 0.332553920 0.351721989 0.351992532 0.354813269 0.355688936 0.359922262 0.362747784 0.363541340 0.384288765 0.386005613 0.391662488 0.410528944 0.425384674 0.430231237 0.460307344 0.468611766 0.477599376 0.482837019 0.483558879 0.487441789 0.491099021 0.509155311 0.515172007 0.535143640 0.566165277 0.572834989 0.592156988 0.593538972 0.606305760 0.607870442 0.644557895 0.646650449 0.648842761 0.674247743 0.677734688 0.685075547 0.691517515 0.693364559 0.699581790 0.704365541 0.717207983 0.741186926 0.751217386 0.758816834 0.767836363 0.772495385 0.778760999 0.810509100 0.813623362 0.818827020 0.821619338 0.823262657 0.831440508 0.833264253 0.835848633 0.841257269 0.845416635 0.846873728 0.848661918 0.858904626 0.865606281 0.865859437 0.873717694 0.882506780 0.884513444 0.889468642 0.893707402 0.900692873 0.903865814 0.922844675 0.923568630 0.933677880 0.935239613 0.965565642 0.975702783 0.985815834 1.001078571 1.018212909 1.027577279 1.041501792 1.050628693 1.057399817 1.068407516 1.086562396 1.088564984 1.104056315 1.106251435 1.112272191 1.122178849 1.124259167 1.135617628 1.143356418 1.174224330 1.177024553 1.180998182 1.186313602 1.190483091 1.196124794 1.224068506 1.228065297 1.274240262 1.301388600 1.319304841 1.328073922 1.332658695 1.335136648 1.335883895 1.341851130 1.342894611 1.344897309 1.358938822 1.378518643 1.382859165 1.384116650 1.414862448 1.419691584 1.435693777 1.551455983 1.680552728 1.775683157</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">204</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34346795" y3="0.02450641" z3="-0.18840323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3892438" y3="0.15897933" z3="0.41838954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64599451" y3="0.4300276" z3="-0.33769394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71595128" y3="1.21939193" z3="-2.24791617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38635982" y3="0.40498763" z3="-1.17698039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71478953" y3="0.82543953" z3="-3.64602149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61337456" y3="1.73024889" z3="-3.1114437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.34992899" y3="2.57019224" z3="-4.57569855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54217941" y3="1.22707713" z3="-4.35216853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46765856" y3="2.90416375" z3="-5.13050935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92313634" y3="-0.50542858" z3="-3.43949875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10035066" y3="0.00206984" z3="-0.99536845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40862608" y3="-1.13699191" z3="-2.00365943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93673703" y3="-1.01743506" z3="-1.82388347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11849641" y3="-2.45867142" z3="-1.86336801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13390663" y3="-3.59613154" z3="0.65419181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0155208" y3="-5.29557138" z3="-4.74410217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24306016" y3="-5.02471602" z3="-3.70950999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8376499" y3="-4.3002869" z3="-1.09788772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78515854" y3="-4.6255941" z3="-2.85779093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56165845" y3="-5.08855214" z3="-3.25464966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85986412" y3="-4.72026505" z3="-1.94505252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.5000345" y3="-4.27936788" z3="-1.53549856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82016503" y3="-4.565355" z3="-3.20156859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36373653" y3="-5.3961614" z3="-3.92913637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89816514" y3="-4.73738147" z3="-1.60535936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02406241" y3="-3.83861736" z3="0.21880915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16246865" y3="-3.62381727" z3="0.86606131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05119553" y3="-4.08688951" z3="0.43478714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15515664" y3="-3.48551319" z3="2.3327669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21086601" y3="-3.29634369" z3="5.13039447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35210092" y3="-3.68336143" z3="3.03701725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98592439" y3="-3.19890019" z3="3.0534516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01154656" y3="-3.10480174" z3="4.4419152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37889458" y3="-3.59107158" z3="4.42578155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27064733" y3="-3.91704993" z3="2.48915536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02625125" y3="-3.07021866" z3="2.54795686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08336318" y3="-2.90010691" z3="4.98030651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31799908" y3="-3.75588799" z3="4.96140771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23053758" y3="-3.23007994" z3="6.22170042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42577815" y3="-3.92502707" z3="-0.63214599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18686009" y3="-3.4290696" z3="-1.08662263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50879086" y3="0.21876768" z3="-4.70184714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0743119" y3="-1.69729401" z3="0.00856118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88421294" y3="-0.94247454" z3="1.16491748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81493631" y3="-0.29879911" z3="1.48514822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34324244" y3="0.58019332" z3="1.19207022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40183744" y3="1.45011118" z3="-0.4512386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00865014" y3="-0.66961582" z3="1.41091062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35446471" y3="1.80084687" z3="2.61315654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85121177" y3="-0.92188504" z3="2.07130127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60593979" y3="-0.30639151" z3="3.32611675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17301671" y3="0.74055622" z3="-1.26515921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3832645" y3="2.22822335" z3="-0.45976935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.374042" y3="1.94593419" z3="-0.62298227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01957931" y3="-1.02551529" z3="2.45458535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98508094" y3="-0.20942446" z3="1.18428517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89417683" y3="-1.51714805" z3="0.71528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42070429" y3="1.28162998" z3="3.58547688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57948821" y3="2.39219715" z3="2.61096068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1984529" y3="2.50944553" z3="2.53796009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74272591" y3="-0.76827341" z3="3.83180251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51661126" y3="-0.47116085" z3="3.91737651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42798016" y3="0.77401156" z3="3.20122061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85123879" y3="-0.73778454" z3="0.99367187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41074815" y3="-2.05956305" z3="0.84954803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75847898" y3="-2.70526648" z3="1.89247252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56482053" y3="-2.01679613" z3="3.08679247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06008957" y3="-0.7319341" z3="3.28765936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71149011" y3="-0.09944498" z3="2.23338765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50400647" y3="-2.55264365" z3="-0.11988529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35007825" y3="-3.70886349" z3="1.76449637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70256231" y3="-2.61319063" z3="4.11196225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88987042" y3="-0.22612803" z3="4.23851848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06578341" y3="0.92799756" z3="2.35311085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81351231" y3="0.43610871" z3="-4.29139182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78994286" y3="-0.53195075" z3="-4.48115224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43410329" y3="-1.72216462" z3="-5.10525533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14251969" y3="-1.95052366" z3="-5.5700851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82695574" y3="-0.97822338" z3="-5.35568148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06589842" y3="1.35795063" z3="-3.76109864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81271112" y3="-0.3878385" z3="-4.13167699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44290612" y3="-2.77218448" z3="-5.25679449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09497656" y3="-2.88960018" z3="-6.07047571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8523548" y3="-1.16179532" z3="-5.68135552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3842913" y3="-1.92061355" z3="5.05854675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31384687" y3="-3.74986714" z3="3.93954981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20998924" y3="-3.67301186" z3="-6.03433731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45217903" y3="-2.68854003" z3="-4.58558977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0613117" y3="1.16436734" z3="-1.48202832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0951356" y3="1.55199391" z3="-2.45564867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42634834" y3="1.5094328" z3="-1.67935751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82747576" y3="2.18918592" z3="-2.80328499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15699226" y3="1.21223765" z3="-0.92071977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88123605" y3="2.44417254" z3="-2.94692007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54623892" y3="2.23708317" z3="-3.6181439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87449524" y3="2.54635971" z3="-3.78718347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82074561" y3="2.5087764" z3="-4.38846318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19898592" y3="3.06654352" z3="-4.69274236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36882684" y3="3.13403907" z3="-3.29057559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24755934" y3="3.54576426" z3="-4.06963267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1678581" y3="4.14510194" z3="-2.68548794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90254483" y3="5.47852374" z3="-2.89012688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00070306" y3="3.85625622" z3="-2.04251172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53208279" y3="6.23485254" z3="-2.41168188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.00845102" y3="4.93195205" z3="-4.27675117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82017178" y3="5.88173693" z3="-3.70761463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15260312" y3="5.22902873" z3="-4.89077324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62493776" y3="6.94517292" z3="-3.87036453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47751166" y3="-2.16933417" z3="-0.29600958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45865057" y3="-2.96833869" z3="-1.05671769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00188197" y3="-2.54106724" z3="0.59886504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09038213" y3="-1.34924791" z3="-0.71614644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17844889" y3="-1.41109197" z3="-1.16996525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31357495" y3="-0.37110376" z3="-1.52114272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10138072" y3="-1.53976921" z3="-0.97179956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42909566" y3="-2.06844359" z3="-2.01633557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3435,.0245,-.1884;7.3892,.159,.4184;6.646,.43,-.3377;4.716,1.2194,-2.2479;4.3864,.405,-1.177;2.7148,.8254,-3.646;3.6134,1.7302,-3.1114;1.3499,2.5702,-4.5757;1.5422,1.2271,-4.3522;.4677,2.9042,-5.1305;2.9231,-.5054,-3.4395;3.1004,.0021,-.9954;2.4086,-1.137,-2.0037;.9367,-1.0174,-1.8239;3.1185,-2.4587,-1.8634;-.1339,-3.5961,.6542;-.0155,-5.2956,-4.7441;-.2431,-5.0247,-3.7095;-.8376,-4.3003,-1.0979;.7852,-4.6256,-2.8578;-1.5617,-5.0886,-3.2546;-1.8599,-4.7203,-1.9451;.5,-4.2794,-1.5355;1.8202,-4.5654,-3.2016;-2.3637,-5.3962,-3.9291;-2.8982,-4.7374,-1.6054;-1.0241,-3.8386,.2188;-2.1625,-3.6238,.8661;-3.0512,-4.0869,.4348;-2.1552,-3.4855,2.3328;-2.2109,-3.2963,5.1304;-3.3521,-3.6834,3.037;-.9859,-3.1989,3.0535;-1.0115,-3.1048,4.4419;-3.3789,-3.5911,4.4258;-4.2706,-3.917,2.4892;-.0263,-3.0702,2.548;-.0834,-2.9001,4.9803;-4.318,-3.7559,4.9614;-2.2305,-3.2301,6.2217;1.4258,-3.925,-.6321;2.1869,-3.4291,-1.0866;.5088,.2188,-4.7018;-3.0743,-1.6973,.0086;-2.8842,-.9425,1.1649;-1.8149,-.2988,1.4851;-.3432,.5802,1.1921;-.4018,1.4501,-.4512;1.0087,-.6696,1.4109;-.3545,1.8008,2.6132;-3.8512,-.9219,2.0713;-3.6059,-.3064,3.3261;-.173,.7406,-1.2652;.3833,2.2282,-.4598;-1.374,1.9459,-.623;1.0196,-1.0255,2.4546;1.9851,-.2094,1.1843;.8942,-1.5171,.7153;-.4207,1.2816,3.5855;.5795,2.3922,2.611;-1.1985,2.5094,2.538;-2.7427,-.7683,3.8318;-4.5166,-.4712,3.9174;-3.428,.774,3.2012;4.8512,-.7378,.9937;4.4107,-2.0596,.8495;3.7585,-2.7053,1.8925;3.5648,-2.0168,3.0868;4.0601,-.7319,3.2877;4.7115,-.0994,2.2334;4.504,-2.5526,-.1199;3.3501,-3.7089,1.7645;2.7026,-2.6132,4.112;3.8899,-.2261,4.2385;5.0658,.928,2.3531;-.8135,.4361,-4.2914;-1.7899,-.532,-4.4812;-1.4341,-1.7222,-5.1053;-.1425,-1.9505,-5.5701;.827,-.9782,-5.3557;-1.0659,1.358,-3.7611;-2.8127,-.3878,-4.1317;-2.4429,-2.7722,-5.2568;.095,-2.8896,-6.0705;1.8524,-1.1618,-5.6814;2.3843,-1.9206,5.0585;2.3138,-3.7499,3.9395;-2.21,-3.673,-6.0343;-3.4522,-2.6885,-4.5856;7.0613,1.1644,-1.482;6.0951,1.552,-2.4556;8.4263,1.5094,-1.6794;8.8275,2.1892,-2.8033;9.157,1.2122,-.9207;9.8812,2.4442,-2.9469;6.5462,2.2371,-3.6181;7.8745,2.5464,-3.7872;5.8207,2.5088,-4.3885;8.199,3.0665,-4.6927;3.3688,3.134,-3.2906;2.2476,3.5458,-4.0696;4.1679,4.1451,-2.6855;3.9025,5.4785,-2.8901;5.0007,3.8563,-2.0425;4.5321,6.2349,-2.4117;2.0085,4.932,-4.2768;2.8202,5.8817,-3.7076;1.1526,5.229,-4.8908;2.6249,6.9452,-3.8704;-4.4775,-2.1693,-.296;-4.4587,-2.9683,-1.0567;-5.0019,-2.5411,.5989;-5.0904,-1.3492,-.7161;-2.1784,-1.4111,-1.17;-2.3136,-.3711,-1.5211;-1.1014,-1.5398,-.9718;-2.4291,-2.0684,-2.0163;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650394571052</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001809056511 0.000343616983 0.021023684001 0.005331439442</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030625179 -0.000630444 0.000068916 0.000154363 0.000208445 0.000287465 0.000412495 0.000440984 0.000593130 0.000788051 0.000936605 0.001049916 0.001264330 0.001309289 0.001356197 0.001404321 0.001661883 0.001792361 0.001835432 0.001942407 0.002165581 0.002519603 0.002559732 0.002704946 0.002848232 0.003055419 0.003263564 0.003454301 0.003876768 0.003962407 0.004400267 0.004779960 0.004836360 0.005079596 0.005929477 0.006057285 0.006302772 0.006623733 0.006839457 0.007582916 0.008039920 0.008199835 0.009226288 0.009556956 0.009989569 0.010699058 0.011051773 0.011621532 0.011679415 0.012211376 0.012860253 0.013186737 0.014009986 0.014406613 0.015014033 0.015365245 0.015688042 0.016209667 0.016833149 0.017268037 0.017500452 0.018015099 0.019371924 0.019455737 0.019919439 0.020809458 0.021213774 0.021420629 0.022429740 0.023124411 0.025146126 0.025948871 0.026724759 0.026975666 0.027446513 0.029255949 0.029444276 0.031407369 0.033262290 0.033503648 0.033871006 0.035805544 0.036812406 0.037558856 0.039572054 0.039986477 0.040754212 0.042121807 0.043894708 0.044429146 0.045290544 0.046829505 0.047652015 0.049182617 0.050292424 0.050803445 0.051034094 0.051227814 0.052477685 0.052579189 0.052868182 0.052961340 0.054641370 0.054714765 0.055532974 0.056196799 0.056495766 0.056504322 0.057027067 0.058392322 0.060295796 0.060693374 0.061604564 0.062072400 0.063171805 0.064376158 0.065109977 0.065801383 0.066334518 0.067780966 0.068915111 0.070188049 0.072671426 0.074454445 0.074489043 0.076170083 0.077863887 0.083604078 0.085180736 0.086882893 0.087234086 0.088027265 0.090398558 0.090915106 0.092979608 0.094598086 0.095238709 0.096314751 0.097318184 0.097884894 0.098877386 0.099891306 0.100265312 0.102344831 0.102828508 0.103296804 0.103443877 0.103942636 0.105697807 0.106845397 0.107374650 0.109561866 0.110541505 0.111568998 0.112498788 0.113286832 0.114932492 0.116185164 0.116586830 0.119080416 0.120757571 0.121951115 0.122908628 0.124529100 0.125514409 0.126247875 0.126958674 0.131748645 0.134931868 0.135671238 0.142726011 0.143525675 0.146948182 0.147278633 0.149618795 0.152257007 0.154710364 0.156006561 0.156635005 0.161375275 0.161769789 0.173337354 0.173942315 0.179675744 0.183971799 0.185233123 0.189236169 0.190147188 0.193921731 0.193977441 0.198341525 0.200123683 0.205092121 0.206878522 0.207233423 0.209936670 0.213625608 0.216177675 0.217600726 0.218100730 0.220601659 0.225050284 0.226224219 0.231954924 0.234969369 0.235427763 0.235794612 0.244549685 0.255917194 0.257176950 0.263402078 0.269777702 0.280313734 0.282880260 0.286199562 0.291498271 0.296602588 0.304219104 0.305639945 0.307226847 0.313944949 0.316470812 0.317331385 0.321984628 0.329643940 0.332576804 0.351722481 0.352005827 0.354814704 0.355693892 0.359922808 0.362755171 0.363584162 0.384288619 0.386007722 0.391687420 0.410553381 0.425384643 0.430231359 0.460676087 0.468612644 0.477623634 0.482858768 0.483565050 0.487441785 0.491110701 0.509168486 0.515175952 0.535143600 0.566166312 0.572834923 0.592178386 0.593553535 0.606326309 0.607870316 0.644567450 0.646680119 0.648844132 0.674249463 0.677744247 0.685085061 0.691517521 0.693367233 0.699583143 0.704372632 0.717215466 0.741196280 0.751217616 0.758838912 0.767915486 0.772501731 0.778762212 0.810527938 0.813630867 0.818835302 0.821621486 0.823290765 0.831442478 0.833337695 0.835851618 0.841367985 0.845443524 0.846902034 0.848664581 0.858913986 0.865623941 0.865882345 0.873762731 0.882772927 0.884515457 0.889477112 0.893718052 0.900702251 0.903878423 0.922845457 0.923569198 0.933681722 0.935255408 0.965597873 0.975707051 0.985869567 1.001090068 1.018240955 1.027656095 1.041540959 1.050641179 1.057403126 1.068416535 1.086565056 1.088567560 1.104150724 1.106253207 1.112274234 1.122368158 1.124301900 1.135665424 1.143417886 1.174229625 1.177187304 1.180999590 1.186326360 1.190494234 1.196125153 1.224069040 1.228065339 1.274248339 1.301400782 1.319351284 1.328080885 1.332658695 1.335189212 1.335886415 1.341860125 1.342917834 1.344897388 1.358940124 1.378544119 1.382859305 1.384119302 1.414929477 1.419697765 1.435743710 1.551460140 1.680695709 1.775699116</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">205</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34710734" y3="0.02074656" z3="-0.19096481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39356226" y3="0.15575213" z3="0.41321883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64900602" y3="0.42751472" z3="-0.34134713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71572528" y3="1.21859027" z3="-2.2474414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38840859" y3="0.40232489" z3="-1.17759439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71407227" y3="0.8242805" z3="-3.64437859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6115013" y3="1.72939831" z3="-3.10882297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3459353" y3="2.56747506" z3="-4.5703589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54016399" y3="1.22541968" z3="-4.34868141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46236389" y3="2.90163626" z3="-5.12302516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92429267" y3="-0.5065313" z3="-3.43955994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10306473" y3="-0.00183166" z3="-0.99506744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40965921" y3="-1.13890213" z3="-2.00428817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93805746" y3="-1.0170163" z3="-1.82371543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11762938" y3="-2.46174815" z3="-1.86575169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13546904" y3="-3.59814784" z3="0.65504547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02105777" y3="-5.29926872" z3="-4.74242242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24772469" y3="-5.0285773" z3="-3.7077005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84014202" y3="-4.30390056" z3="-1.09604287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78111039" y3="-4.6282225" z3="-2.85706771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56561527" y3="-5.09385678" z3="-3.25172253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86246813" y3="-4.72591935" z3="-1.94185585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49664803" y3="-4.28106386" z3="-1.53487914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81627464" y3="-4.56848936" z3="-3.20216411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36794633" y3="-5.40227494" z3="-3.92551479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9003576" y3="-4.7439656" z3="-1.60091433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02600984" y3="-3.8405264" z3="0.22021987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16429327" y3="-3.6213334" z3="0.86667739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05387364" y3="-4.08388141" z3="0.43662066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15728496" y3="-3.47877395" z3="2.33293739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21274073" y3="-3.2816963" z3="5.13008415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35442539" y3="-3.67253952" z3="3.03779429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9877666" y3="-3.19227233" z3="3.05276284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01266258" y3="-3.09493341" z3="4.44112098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38154468" y3="-3.57588846" z3="4.42618152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26951587" y3="-3.91105055" z3="2.49117496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02753107" y3="-3.06758304" z3="2.54714476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08007514" y3="-2.89623247" z3="4.97946431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32006958" y3="-3.73906812" z3="4.96248224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23107605" y3="-3.21423989" z3="6.22152328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42150235" y3="-3.92380969" z3="-0.63275779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.184595" y3="-3.43070364" z3="-1.08865906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.50905655" y3="0.21572293" z3="-4.70018023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07086191" y3="-1.69521953" z3="0.00550669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88228932" y3="-0.93887829" z3="1.16139371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81205201" y3="-0.29733341" z3="1.48331524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3393509" y3="0.58116952" z3="1.19260814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39725986" y3="1.45159082" z3="-0.44978091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01192402" y3="-0.66935393" z3="1.41292794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35324643" y3="1.80110604" z3="2.61445863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85141967" y3="-0.91517505" z3="2.06532579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6101106" y3="-0.2959595" z3="3.3185166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16554362" y3="0.74378474" z3="-1.26334762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38963279" y3="2.22998201" z3="-0.45643107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36940048" y3="1.94595049" z3="-0.62312504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02128429" y3="-1.02467491" z3="2.45707314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98967556" y3="-0.2104153" z3="1.18703381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89820351" y3="-1.51741133" z3="0.71843383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42466353" y3="1.28110349" z3="3.5864629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58061117" y3="2.39200126" z3="2.61663729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19646325" y3="2.51041481" z3="2.53586017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75065081" y3="-0.75846256" z3="3.82953434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52387022" y3="-0.45649176" z3="3.90586227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42801722" y3="0.78399432" z3="3.19069287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85610382" y3="-0.7434157" z3="0.99045988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41274763" y3="-2.06408648" z3="0.84496434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75952185" y3="-2.70966528" z3="1.88735583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56743422" y3="-2.02232813" z3="3.08197235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06704788" y3="-0.73925303" z3="3.28495844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71927398" y3="-0.10676282" z3="2.23127589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50480556" y3="-2.55640437" z3="-0.1246152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34957186" y3="-3.712107" z3="1.75910455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70475595" y3="-2.61779724" z3="4.10735248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90002056" y3="-0.23473988" z3="4.2374393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07697525" y3="0.91959851" z3="2.35266748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81358621" y3="0.42998726" z3="-4.2900446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78840608" y3="-0.5400452" z3="-4.48526464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42893945" y3="-1.72848324" z3="-5.10940103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13608721" y3="-1.95317218" z3="-5.57202527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83067959" y3="-0.97997848" z3="-5.3597564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06816257" y3="1.35026246" z3="-3.75765615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.81172068" y3="-0.39839857" z3="-4.13702852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43572977" y3="-2.78114063" z3="-5.26412749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10268817" y3="-2.89112812" z3="-6.07317252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85629701" y3="-1.16139491" z3="-5.68409554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.39257729" y3="-1.92666526" z3="5.05806492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31116994" y3="-3.75216618" z3="3.9326418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19946022" y3="-3.68182146" z3="-6.04034894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44678998" y3="-2.69964442" z3="-4.59499929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06194866" y3="1.16405643" z3="-1.48486739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09397704" y3="1.5527245" z3="-2.45632297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42631937" y3="1.51080011" z3="-1.68345716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82511742" y3="2.1937943" z3="-2.80632959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15847112" y3="1.21279828" z3="-0.92655631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87833405" y3="2.44951277" z3="-2.95109013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54259346" y3="2.24141945" z3="-3.61766777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87038416" y3="2.55289198" z3="-3.78779219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81572625" y3="2.51474511" z3="-4.38609087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19306701" y3="3.07672594" z3="-4.69227213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3637973" y3="3.13325912" z3="-3.28380458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24122893" y3="3.54425279" z3="-4.06121775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16077331" y3="4.14448247" z3="-2.67604776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89222134" y3="5.47749552" z3="-2.87658853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99534223" y3="3.8552612" z3="-2.03533771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.52119565" y3="6.23285065" z3="-2.39770581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99748746" y3="4.93134294" z3="-4.26226045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.80753039" y3="5.88100268" z3="-3.6910374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.14035321" y3="5.22840105" z3="-4.87450751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.60863216" y3="6.94486749" z3="-3.84934085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47416067" y3="-2.16512874" z3="-0.30201676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4549636" y3="-2.9634004" z3="-1.06342864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00025435" y3="-2.53703439" z3="0.59176226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08577981" y3="-1.34411486" z3="-0.72228086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17171943" y3="-1.41130716" z3="-1.17096778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30495669" y3="-0.3721329" z3="-1.52433405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09500112" y3="-1.54085787" z3="-0.96972718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42000785" y3="-2.06962589" z3="-2.01700592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3471,.0207,-.191;7.3936,.1558,.4132;6.649,.4275,-.3413;4.7157,1.2186,-2.2474;4.3884,.4023,-1.1776;2.7141,.8243,-3.6444;3.6115,1.7294,-3.1088;1.3459,2.5675,-4.5704;1.5402,1.2254,-4.3487;.4624,2.9016,-5.123;2.9243,-.5065,-3.4396;3.1031,-.0018,-.9951;2.4097,-1.1389,-2.0043;.9381,-1.017,-1.8237;3.1176,-2.4617,-1.8658;-.1355,-3.5981,.655;-.0211,-5.2993,-4.7424;-.2477,-5.0286,-3.7077;-.8401,-4.3039,-1.096;.7811,-4.6282,-2.8571;-1.5656,-5.0939,-3.2517;-1.8625,-4.7259,-1.9419;.4966,-4.2811,-1.5349;1.8163,-4.5685,-3.2022;-2.3679,-5.4023,-3.9255;-2.9004,-4.744,-1.6009;-1.026,-3.8405,.2202;-2.1643,-3.6213,.8667;-3.0539,-4.0839,.4366;-2.1573,-3.4788,2.3329;-2.2127,-3.2817,5.1301;-3.3544,-3.6725,3.0378;-.9878,-3.1923,3.0528;-1.0127,-3.0949,4.4411;-3.3815,-3.5759,4.4262;-4.2695,-3.9111,2.4912;-.0275,-3.0676,2.5471;-.0801,-2.8962,4.9795;-4.3201,-3.7391,4.9625;-2.2311,-3.2142,6.2215;1.4215,-3.9238,-.6328;2.1846,-3.4307,-1.0887;.5091,.2157,-4.7002;-3.0709,-1.6952,.0055;-2.8823,-.9389,1.1614;-1.8121,-.2973,1.4833;-.3394,.5812,1.1926;-.3973,1.4516,-.4498;1.0119,-.6694,1.4129;-.3532,1.8011,2.6145;-3.8514,-.9152,2.0653;-3.6101,-.296,3.3185;-.1655,.7438,-1.2633;.3896,2.23,-.4564;-1.3694,1.946,-.6231;1.0213,-1.0247,2.4571;1.9897,-.2104,1.187;.8982,-1.5174,.7184;-.4247,1.2811,3.5865;.5806,2.392,2.6166;-1.1965,2.5104,2.5359;-2.7507,-.7585,3.8295;-4.5239,-.4565,3.9059;-3.428,.784,3.1907;4.8561,-.7434,.9905;4.4127,-2.0641,.845;3.7595,-2.7097,1.8874;3.5674,-2.0223,3.082;4.067,-.7393,3.285;4.7193,-.1068,2.2313;4.5048,-2.5564,-.1246;3.3496,-3.7121,1.7591;2.7048,-2.6178,4.1074;3.9,-.2347,4.2374;5.077,.9196,2.3527;-.8136,.43,-4.29;-1.7884,-.54,-4.4853;-1.4289,-1.7285,-5.1094;-.1361,-1.9532,-5.572;.8307,-.98,-5.3598;-1.0682,1.3503,-3.7577;-2.8117,-.3984,-4.137;-2.4357,-2.7811,-5.2641;.1027,-2.8911,-6.0732;1.8563,-1.1614,-5.6841;2.3926,-1.9267,5.0581;2.3112,-3.7522,3.9326;-2.1995,-3.6818,-6.0403;-3.4468,-2.6996,-4.595;7.0619,1.1641,-1.4849;6.094,1.5527,-2.4563;8.4263,1.5108,-1.6835;8.8251,2.1938,-2.8063;9.1585,1.2128,-.9266;9.8783,2.4495,-2.9511;6.5426,2.2414,-3.6177;7.8704,2.5529,-3.7878;5.8157,2.5147,-4.3861;8.1931,3.0767,-4.6923;3.3638,3.1333,-3.2838;2.2412,3.5443,-4.0612;4.1608,4.1445,-2.676;3.8922,5.4775,-2.8766;4.9953,3.8553,-2.0353;4.5212,6.2329,-2.3977;1.9975,4.9313,-4.2623;2.8075,5.881,-3.691;1.1404,5.2284,-4.8745;2.6086,6.9449,-3.8493;-4.4742,-2.1651,-.302;-4.455,-2.9634,-1.0634;-5.0003,-2.537,.5918;-5.0858,-1.3441,-.7223;-2.1717,-1.4113,-1.171;-2.305,-.3721,-1.5243;-1.095,-1.5409,-.9697;-2.42,-2.0696,-2.017;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650388655580</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001636922073 0.000312657251 0.020719434888 0.005280131152</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030627238 -0.000487315 0.000043676 0.000153759 0.000208987 0.000297886 0.000411687 0.000442000 0.000593304 0.000787898 0.000936569 0.001049773 0.001265395 0.001309546 0.001356289 0.001405485 0.001661841 0.001795373 0.001836264 0.001942470 0.002167001 0.002519835 0.002562092 0.002706238 0.002849587 0.003055199 0.003269432 0.003454385 0.003879904 0.003962430 0.004403426 0.004780023 0.004836472 0.005081851 0.005930090 0.006057435 0.006305417 0.006623860 0.006839424 0.007584048 0.008040472 0.008201451 0.009228126 0.009559204 0.009989964 0.010699508 0.011056005 0.011621638 0.011681416 0.012217974 0.012860989 0.013187992 0.014010073 0.014409171 0.015013440 0.015365688 0.015690119 0.016215414 0.016843885 0.017278108 0.017521536 0.018041037 0.019380322 0.019476922 0.019927395 0.020809551 0.021214618 0.021420707 0.022431498 0.023126167 0.025148033 0.025950080 0.026730607 0.026979484 0.027449191 0.029261749 0.029453830 0.031407860 0.033263930 0.033505701 0.033871819 0.035806937 0.036812514 0.037575597 0.039599870 0.039988054 0.040756208 0.042142461 0.044015281 0.044452959 0.045300970 0.046835810 0.047652270 0.049186177 0.050293235 0.050804788 0.051034324 0.051228474 0.052477848 0.052581340 0.052870925 0.052962524 0.054653900 0.054716030 0.055552007 0.056198744 0.056496007 0.056506329 0.057027078 0.058393587 0.060298039 0.060696853 0.061607848 0.062076473 0.063173478 0.064377313 0.065110969 0.065808316 0.066335012 0.067783829 0.068917305 0.070193115 0.072671506 0.074455922 0.074505689 0.076169909 0.077872816 0.083609182 0.085186069 0.086885027 0.087234372 0.088033054 0.090404468 0.090922419 0.092980296 0.094598493 0.095239872 0.096314930 0.097318484 0.097885211 0.098879317 0.099891911 0.100265638 0.102345438 0.102834117 0.103305171 0.103443901 0.103943144 0.105702028 0.106845420 0.107383472 0.109563059 0.110541765 0.111571294 0.112507177 0.113301610 0.114933437 0.116194248 0.116625144 0.119081827 0.120758838 0.121964092 0.122936188 0.124547413 0.125517789 0.126248455 0.126958742 0.131748633 0.134948045 0.135676775 0.142726367 0.143529996 0.146948235 0.147280420 0.149624388 0.152287203 0.154714647 0.156006932 0.156638639 0.161397367 0.161789524 0.173337291 0.173956762 0.179710472 0.183982622 0.185266467 0.189253891 0.190156728 0.193922110 0.193986525 0.198341565 0.200123676 0.205093171 0.206880772 0.207238223 0.209981161 0.213742513 0.216249645 0.217602726 0.218130340 0.220617087 0.225052660 0.226224587 0.231958167 0.234984337 0.235427937 0.235798863 0.244555964 0.255927124 0.257177277 0.263418730 0.269777611 0.280319214 0.282882182 0.286201117 0.291507619 0.296628823 0.304219050 0.305641911 0.307226857 0.313946021 0.316489302 0.317333125 0.321985091 0.329658636 0.332601049 0.351723548 0.352016198 0.354815016 0.355696618 0.359922853 0.362762300 0.363612845 0.384288577 0.386010069 0.391716673 0.410572370 0.425384619 0.430231403 0.460967464 0.468614489 0.477647805 0.482895960 0.483570081 0.487442683 0.491119273 0.509189437 0.515182243 0.535144583 0.566170989 0.572838780 0.592192078 0.593568125 0.606350582 0.607874068 0.644572285 0.646710807 0.648849967 0.674250435 0.677752181 0.685099908 0.691517599 0.693367286 0.699588939 0.704378887 0.717219102 0.741207312 0.751217973 0.758851015 0.768006204 0.772508000 0.778762887 0.810550762 0.813630883 0.818839976 0.821623711 0.823325392 0.831449110 0.833392093 0.835851687 0.841465287 0.845467032 0.846921460 0.848664695 0.858918704 0.865623896 0.865892956 0.873783844 0.883010536 0.884515738 0.889492458 0.893720127 0.900702638 0.903901310 0.922852522 0.923569194 0.933685385 0.935266422 0.965615221 0.975709148 0.985908739 1.001100451 1.018251803 1.027738323 1.041580782 1.050647977 1.057404574 1.068426234 1.086566304 1.088572556 1.104210672 1.106253549 1.112277760 1.122464147 1.124334254 1.135703082 1.143480287 1.174235039 1.177338058 1.181000517 1.186345819 1.190519401 1.196125142 1.224071596 1.228068512 1.274286827 1.301409972 1.319380808 1.328082591 1.332663601 1.335234692 1.335886300 1.341861177 1.342932873 1.344897337 1.358942224 1.378566918 1.382863425 1.384133320 1.415007501 1.419699583 1.435785296 1.551462799 1.680792473 1.775720403</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">206</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34961744" y3="0.01795832" z3="-0.19405715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39662108" y3="0.1533559" z3="0.40874306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65121035" y3="0.42598478" z3="-0.34469937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71582049" y3="1.21962753" z3="-2.24767725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38985093" y3="0.40041743" z3="-1.17939006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71513303" y3="0.82471873" z3="-3.64568081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61066515" y3="1.73051937" z3="-3.10781658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3433063" y3="2.56811663" z3="-4.56709202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54107093" y3="1.22484117" z3="-4.35024996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.45949609" y3="2.90119679" z3="-5.12000259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92718415" y3="-0.5061734" z3="-3.44230142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.104883" y3="-0.00509605" z3="-0.99672866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.41040411" y3="-1.13978851" z3="-2.00808119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93886697" y3="-1.01562422" z3="-1.82863484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11574424" y3="-2.46410042" z3="-1.87036995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13730089" y3="-3.60081645" z3="0.65892745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02858843" y3="-5.30183194" z3="-4.73973316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25376541" y3="-5.0316807" z3="-3.70448071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84314914" y3="-4.30737971" z3="-1.09161638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7756232" y3="-4.62853534" z3="-2.8559461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57081169" y3="-5.0998796" z3="-3.24574639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86633541" y3="-4.73193224" z3="-1.93545798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49320615" y3="-4.28231128" z3="-1.53309217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80923182" y3="-4.56435468" z3="-3.20283283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37359153" y3="-5.4104719" z3="-3.91793868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90350863" y3="-4.75279835" z3="-1.59248349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02794165" y3="-3.8432627" z3="0.22451845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16599633" y3="-3.62044851" z3="0.87014526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05640946" y3="-4.08199301" z3="0.44081915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15862392" y3="-3.47520964" z3="2.3362509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21467491" y3="-3.26870852" z3="5.13267074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35656415" y3="-3.66356684" z3="3.04126732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98834659" y3="-3.19015739" z3="3.05569814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01370413" y3="-3.08794103" z3="4.44362297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38381899" y3="-3.56221702" z3="4.42936132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27559869" y3="-3.89673143" z3="2.49460554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0279605" y3="-3.06920894" z3="2.54993041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08398451" y3="-2.88570664" z3="4.98100294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3244541" y3="-3.71834869" z3="4.96571368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23475331" y3="-3.19546739" z3="6.22352346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42009565" y3="-3.92345658" z3="-0.63275144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1814765" y3="-3.43061415" z3="-1.09017937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51174962" y3="0.21386205" z3="-4.7042834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06731286" y3="-1.69468523" z3="0.00317184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88161464" y3="-0.93632661" z3="1.15808303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81155521" y3="-0.2960403" z3="1.48307413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33658175" y3="0.57871576" z3="1.1941886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39222247" y3="1.45214915" z3="-0.44711813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.01284366" y3="-0.67415147" z3="1.41056162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34627476" y3="1.79490973" z3="2.61910655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85449571" y3="-0.90880459" z3="2.05791826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61674259" y3="-0.28621155" z3="3.31062738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.16183124" y3="0.74402347" z3="-1.26194259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39304305" y3="2.23045886" z3="-0.45292215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36416071" y3="1.94778017" z3="-0.61963197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02464941" y3="-1.03050305" z3="2.45396124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98958417" y3="-0.21537503" z3="1.18290357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89655172" y3="-1.52124612" z3="0.71489875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41498348" y3="1.272178" z3="3.58907653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58887694" y3="2.38426348" z3="2.62061692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18859614" y3="2.50513287" z3="2.54556872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75849494" y3="-0.74718523" z3="3.82554594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53226243" y3="-0.44500236" z3="3.89594858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43534124" y3="0.79299001" z3="3.18035262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85962658" y3="-0.74753982" z3="0.98684591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41480399" y3="-2.06754932" z3="0.8396234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76108555" y3="-2.71382266" z3="1.8812931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.57068521" y3="-2.02795225" z3="3.07752263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.07140555" y3="-0.7457352" z3="3.28175853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.72400223" y3="-0.11251004" z3="2.22870305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50492617" y3="-2.55833024" z3="-0.13143049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34862103" y3="-3.71538438" z3="1.75069154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.7060021" y3="-2.62327956" z3="4.10129341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.90393408" y3="-0.24203505" z3="4.23406856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.08205459" y3="0.91336549" z3="2.35101777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.81149931" y3="0.42522262" z3="-4.29393286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78411699" y3="-0.54614523" z3="-4.4871287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42328049" y3="-1.73393769" z3="-5.11261815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13057412" y3="-1.95616216" z3="-5.57705072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8347812" y3="-0.98039082" z3="-5.36149585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06719788" y3="1.34452735" z3="-3.76141895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80762463" y3="-0.40693923" z3="-4.1378455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42776168" y3="-2.78787823" z3="-5.26501281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11107149" y3="-2.89350927" z3="-6.07897872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86092801" y3="-1.15923271" z3="-5.68728027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.39452055" y3="-1.93327942" z3="5.0520055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30881725" y3="-3.75612847" z3="3.92406293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18981812" y3="-3.68905289" z3="-6.04066976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43862241" y3="-2.70699606" z3="-4.59605143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06278802" y3="1.16566718" z3="-1.48692301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09379041" y3="1.5563268" z3="-2.45655887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42682061" y3="1.51361071" z3="-1.68597866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82416853" y3="2.1993647" z3="-2.80759004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15978873" y3="1.21379498" z3="-0.93062383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8772773" y3="2.45667965" z3="-2.95260189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5409063" y3="2.24824847" z3="-3.61654281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.86823182" y3="2.56027852" z3="-3.78725044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81308626" y3="2.52267136" z3="-4.38372081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.18968505" y3="3.08540712" z3="-4.6909124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36016508" y3="3.13413436" z3="-3.27950253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23641873" y3="3.54504103" z3="-4.05536458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.15497611" y3="4.14525405" z3="-2.66892536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88251277" y3="5.47850987" z3="-2.86437358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99022636" y3="3.8562169" z3="-2.02907328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.50869615" y3="6.23473795" z3="-2.38173627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.98991718" y3="4.93139252" z3="-4.25293028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.7969125" y3="5.88163862" z3="-3.67768226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.13183417" y3="5.22827258" z3="-4.86397791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.59554295" y3="6.94518893" z3="-3.83256385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47018553" y3="-2.16332739" z3="-0.30788011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44920338" y3="-2.96375849" z3="-1.0670384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00062867" y3="-2.53223033" z3="0.58482124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07808872" y3="-1.3419975" z3="-0.73253041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16473857" y3="-1.41408811" z3="-1.17169873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2949418" y3="-0.37481017" z3="-1.52651498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08833772" y3="-1.54536775" z3="-0.9684301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41218083" y3="-2.07337021" z3="-2.01737348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3496,.018,-.1941;7.3966,.1534,.4087;6.6512,.426,-.3447;4.7158,1.2196,-2.2477;4.3899,.4004,-1.1794;2.7151,.8247,-3.6457;3.6107,1.7305,-3.1078;1.3433,2.5681,-4.5671;1.5411,1.2248,-4.3502;.4595,2.9012,-5.12;2.9272,-.5062,-3.4423;3.1049,-.0051,-.9967;2.4104,-1.1398,-2.0081;.9389,-1.0156,-1.8286;3.1157,-2.4641,-1.8704;-.1373,-3.6008,.6589;-.0286,-5.3018,-4.7397;-.2538,-5.0317,-3.7045;-.8431,-4.3074,-1.0916;.7756,-4.6285,-2.8559;-1.5708,-5.0999,-3.2457;-1.8663,-4.7319,-1.9355;.4932,-4.2823,-1.5331;1.8092,-4.5644,-3.2028;-2.3736,-5.4105,-3.9179;-2.9035,-4.7528,-1.5925;-1.0279,-3.8433,.2245;-2.166,-3.6204,.8701;-3.0564,-4.082,.4408;-2.1586,-3.4752,2.3363;-2.2147,-3.2687,5.1327;-3.3566,-3.6636,3.0413;-.9883,-3.1902,3.0557;-1.0137,-3.0879,4.4436;-3.3838,-3.5622,4.4294;-4.2756,-3.8967,2.4946;-.028,-3.0692,2.5499;-.084,-2.8857,4.981;-4.3245,-3.7183,4.9657;-2.2348,-3.1955,6.2235;1.4201,-3.9235,-.6328;2.1815,-3.4306,-1.0902;.5117,.2139,-4.7043;-3.0673,-1.6947,.0032;-2.8816,-.9363,1.1581;-1.8116,-.296,1.4831;-.3366,.5787,1.1942;-.3922,1.4521,-.4471;1.0128,-.6742,1.4106;-.3463,1.7949,2.6191;-3.8545,-.9088,2.0579;-3.6167,-.2862,3.3106;-.1618,.744,-1.2619;.393,2.2305,-.4529;-1.3642,1.9478,-.6196;1.0246,-1.0305,2.454;1.9896,-.2154,1.1829;.8966,-1.5212,.7149;-.415,1.2722,3.5891;.5889,2.3843,2.6206;-1.1886,2.5051,2.5456;-2.7585,-.7472,3.8255;-4.5323,-.445,3.8959;-3.4353,.793,3.1804;4.8596,-.7475,.9868;4.4148,-2.0675,.8396;3.7611,-2.7138,1.8813;3.5707,-2.028,3.0775;4.0714,-.7457,3.2818;4.724,-.1125,2.2287;4.5049,-2.5583,-.1314;3.3486,-3.7154,1.7507;2.706,-2.6233,4.1013;3.9039,-.242,4.2341;5.0821,.9134,2.351;-.8115,.4252,-4.2939;-1.7841,-.5461,-4.4871;-1.4233,-1.7339,-5.1126;-.1306,-1.9562,-5.5771;.8348,-.9804,-5.3615;-1.0672,1.3445,-3.7614;-2.8076,-.4069,-4.1378;-2.4278,-2.7879,-5.265;.1111,-2.8935,-6.079;1.8609,-1.1592,-5.6873;2.3945,-1.9333,5.052;2.3088,-3.7561,3.9241;-2.1898,-3.6891,-6.0407;-3.4386,-2.707,-4.5961;7.0628,1.1657,-1.4869;6.0938,1.5563,-2.4566;8.4268,1.5136,-1.686;8.8242,2.1994,-2.8076;9.1598,1.2138,-.9306;9.8773,2.4567,-2.9526;6.5409,2.2482,-3.6165;7.8682,2.5603,-3.7873;5.8131,2.5227,-4.3837;8.1897,3.0854,-4.6909;3.3602,3.1341,-3.2795;2.2364,3.545,-4.0554;4.155,4.1453,-2.6689;3.8825,5.4785,-2.8644;4.9902,3.8562,-2.0291;4.5087,6.2347,-2.3817;1.9899,4.9314,-4.2529;2.7969,5.8816,-3.6777;1.1318,5.2283,-4.864;2.5955,6.9452,-3.8326;-4.4702,-2.1633,-.3079;-4.4492,-2.9638,-1.067;-5.0006,-2.5322,.5848;-5.0781,-1.342,-.7325;-2.1647,-1.4141,-1.1717;-2.2949,-.3748,-1.5265;-1.0883,-1.5454,-.9684;-2.4122,-2.0734,-2.0174;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650381443531</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001526446150 0.000284310160 0.017681413639 0.005076660821</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030629331 -0.000407837 0.000005191 0.000159435 0.000208009 0.000306679 0.000411030 0.000435925 0.000593037 0.000787490 0.000936398 0.001049890 0.001264771 0.001309731 0.001356377 0.001409419 0.001662138 0.001799127 0.001840742 0.001942851 0.002167691 0.002521391 0.002562401 0.002709136 0.002853288 0.003055177 0.003271458 0.003454594 0.003881510 0.003962711 0.004411981 0.004780102 0.004836432 0.005085103 0.005931680 0.006058055 0.006307980 0.006624024 0.006839424 0.007583844 0.008041070 0.008202263 0.009231549 0.009560623 0.009990729 0.010701485 0.011059936 0.011623185 0.011681451 0.012223693 0.012862445 0.013188825 0.014009964 0.014411605 0.015013459 0.015366540 0.015691915 0.016220997 0.016849523 0.017277575 0.017526851 0.018067390 0.019381305 0.019492527 0.019930116 0.020809609 0.021215724 0.021422212 0.022433929 0.023127781 0.025151256 0.025952266 0.026736206 0.026982304 0.027452763 0.029265104 0.029461302 0.031408257 0.033267567 0.033507646 0.033872670 0.035809612 0.036812555 0.037584983 0.039614823 0.039989870 0.040759971 0.042165293 0.044117964 0.044499247 0.045312579 0.046840336 0.047652391 0.049189634 0.050293363 0.050805760 0.051034644 0.051228699 0.052478228 0.052584660 0.052873275 0.052965525 0.054661386 0.054718944 0.055574335 0.056199426 0.056496209 0.056508311 0.057027067 0.058394053 0.060299968 0.060699119 0.061612020 0.062080205 0.063174769 0.064378107 0.065112145 0.065812763 0.066335118 0.067784606 0.068919160 0.070198602 0.072672023 0.074455776 0.074516863 0.076169964 0.077880648 0.083612899 0.085192763 0.086887041 0.087237031 0.088038315 0.090409585 0.090927052 0.092980404 0.094598586 0.095243056 0.096314976 0.097321129 0.097885747 0.098881412 0.099894042 0.100265718 0.102347724 0.102849013 0.103310047 0.103445585 0.103942735 0.105708581 0.106845446 0.107389053 0.109563110 0.110541728 0.111574777 0.112514606 0.113331231 0.114933914 0.116195122 0.116634656 0.119081702 0.120759013 0.121978725 0.122958508 0.124554809 0.125522719 0.126250295 0.126959743 0.131748979 0.134954814 0.135686117 0.142726243 0.143534800 0.146948647 0.147283574 0.149631497 0.152305568 0.154715716 0.156007034 0.156640757 0.161420904 0.161812043 0.173337230 0.173974264 0.179734032 0.183991197 0.185293841 0.189269428 0.190158306 0.193922276 0.193997258 0.198341582 0.200124003 0.205096076 0.206881600 0.207237968 0.210015052 0.213802879 0.216284504 0.217603009 0.218148395 0.220626857 0.225052640 0.226224631 0.231963073 0.234995127 0.235428564 0.235807228 0.244559366 0.255933135 0.257180264 0.263431344 0.269777507 0.280321712 0.282883147 0.286201491 0.291516126 0.296645299 0.304220073 0.305642883 0.307232658 0.313946216 0.316507803 0.317334790 0.321985557 0.329665986 0.332618796 0.351723582 0.352024017 0.354815174 0.355699640 0.359926151 0.362769066 0.363627937 0.384288765 0.386016381 0.391748488 0.410587195 0.425384626 0.430231543 0.461200538 0.468617072 0.477672724 0.482968953 0.483572619 0.487444327 0.491127234 0.509213013 0.515189263 0.535145505 0.566174722 0.572846230 0.592201330 0.593576872 0.606372088 0.607890366 0.644574594 0.646726783 0.648852820 0.674251065 0.677757198 0.685120947 0.691517727 0.693369990 0.699596666 0.704384414 0.717219841 0.741219131 0.751218629 0.758854860 0.768063982 0.772510911 0.778763633 0.810585916 0.813635250 0.818851919 0.821625857 0.823350645 0.831456920 0.833432859 0.835851850 0.841527211 0.845481069 0.846930632 0.848664707 0.858920921 0.865635711 0.865894620 0.873791195 0.883205456 0.884515744 0.889505134 0.893721653 0.900702650 0.903923128 0.922868078 0.923569657 0.933687554 0.935277303 0.965619607 0.975710747 0.985935659 1.001106850 1.018257642 1.027793420 1.041614298 1.050653294 1.057405332 1.068437540 1.086566414 1.088576563 1.104237575 1.106253621 1.112281298 1.122497101 1.124352473 1.135728816 1.143536131 1.174239524 1.177521104 1.181001706 1.186365176 1.190560661 1.196125297 1.224080759 1.228077485 1.274316402 1.301414209 1.319402884 1.328083085 1.332667037 1.335278085 1.335886504 1.341863817 1.342955128 1.344897726 1.358944191 1.378580092 1.382865287 1.384143604 1.415061934 1.419700289 1.435804087 1.551464768 1.680874756 1.775760433</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">207</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34785188" y3="0.01962177" z3="-0.1969159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39411954" y3="0.15395841" z3="0.40840085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64968681" y3="0.42760237" z3="-0.34559767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71675847" y3="1.22259895" z3="-2.25042127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38928317" y3="0.40345812" z3="-1.1827851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71801986" y3="0.82765653" z3="-3.65097079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61283425" y3="1.73340377" z3="-3.1121828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3472588" y3="2.5702351" z3="-4.57438038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54424493" y3="1.22793893" z3="-4.3560212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.46342261" y3="2.90389575" z3="-5.12686651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92972841" y3="-0.50311971" z3="-3.44690559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10396986" y3="-0.00138444" z3="-1.00151557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40970514" y3="-1.13563771" z3="-2.01353007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93805795" y3="-1.00949144" z3="-1.83700647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11318341" y3="-2.46071785" z3="-1.87370509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13915456" y3="-3.60484365" z3="0.66607021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03478078" y3="-5.29840034" z3="-4.73545469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25871636" y3="-5.03061115" z3="-3.69939525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84487273" y3="-4.31199813" z3="-1.08461309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77087046" y3="-4.62345046" z3="-2.85301626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57406532" y3="-5.10588658" z3="-3.23766472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86771674" y3="-4.74131058" z3="-1.92612736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48980485" y3="-4.2792953" z3="-1.5293244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80397421" y3="-4.55548563" z3="-3.20279405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37707845" y3="-5.41897337" z3="-3.90851206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90379611" y3="-4.76788698" z3="-1.58022687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0294474" y3="-3.84863601" z3="0.23192474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16780178" y3="-3.6226175" z3="0.87624765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05872022" y3="-4.08362003" z3="0.44728902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16187875" y3="-3.47380432" z3="2.34194152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21930276" y3="-3.26128478" z3="5.13803249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36092782" y3="-3.65777864" z3="3.04653379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99164711" y3="-3.18997195" z3="3.06164719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01771827" y3="-3.08437875" z3="4.4493221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3887321" y3="-3.55375601" z3="4.43444201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27750539" y3="-3.89345154" z3="2.50014917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02982" y3="-3.07438741" z3="2.55658432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08507212" y3="-2.88675007" z3="4.98697373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32837435" y3="-3.70979393" z3="4.97054161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23872298" y3="-3.18730853" z3="6.22902713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41587079" y3="-3.91522619" z3="-0.63118418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17784031" y3="-3.42418775" z3="-1.09087562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51470912" y3="0.21703175" z3="-4.70809405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06541384" y3="-1.69785438" z3="0.00412511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88290961" y3="-0.9371309" z3="1.15822339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81523135" y3="-0.29389649" z3="1.48463376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33453406" y3="0.57193705" z3="1.19336662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39260244" y3="1.45165801" z3="-0.44409059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00997735" y3="-0.6877264" z3="1.40169574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33294603" y3="1.78210011" z3="2.62312207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85758879" y3="-0.90919852" z3="2.05609211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62420356" y3="-0.2821672" z3="3.30707247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1645027" y3="0.74730754" z3="-1.26176385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39650945" y3="2.22746054" z3="-0.44831847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36339105" y3="1.95050489" z3="-0.6130588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.02280374" y3="-1.04626823" z3="2.44461704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98855647" y3="-0.23172907" z3="1.17304022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.89015644" y3="-1.53319716" z3="0.70518072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40274765" y3="1.25538268" z3="3.59171705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60498159" y3="2.36658206" z3="2.6244612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17176856" y3="2.49775296" z3="2.55426874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76702222" y3="-0.74014491" z3="3.82580071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54114079" y3="-0.44024001" z3="3.8903455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4427815" y3="0.7971127" z3="3.17363637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85668464" y3="-0.74757569" z3="0.98248873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41479784" y3="-2.06838675" z3="0.83433827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76103721" y3="-2.71633346" z3="1.8750026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56756159" y3="-2.03134234" z3="3.07089938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.06578621" y3="-0.7482145" z3="3.27647467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.71807896" y3="-0.11325721" z3="2.22431774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50805592" y3="-2.55892281" z3="-0.1359539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35139303" y3="-3.71859946" z3="1.74419575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70363541" y3="-2.62848695" z3="4.09430701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.89747436" y3="-0.24559414" z3="4.22979739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.07438575" y3="0.91323773" z3="2.3476231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80765257" y3="0.42816838" z3="-4.29562456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78015642" y3="-0.54450137" z3="-4.48660788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.41906213" y3="-1.73276325" z3="-5.11061695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.12702268" y3="-1.95421659" z3="-5.57709365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83769253" y3="-0.9779276" z3="-5.36732135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06350093" y3="1.34790531" z3="-3.76267025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8027673" y3="-0.40541067" z3="-4.13553614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42317071" y3="-2.78871719" z3="-5.26018851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.11326645" y3="-2.89206224" z3="-6.07776433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.86300739" y3="-1.15679912" z3="-5.69420422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.39421308" y3="-1.94037277" z3="5.04811868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30598654" y3="-3.76079786" z3="3.91485235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.18581666" y3="-3.69141663" z3="-6.03375945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43336387" y3="-2.70770338" z3="-4.58976879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06266788" y3="1.168439" z3="-1.48640465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09482514" y3="1.55924315" z3="-2.45715181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.426914" y3="1.51755291" z3="-1.68287222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82573123" y3="2.20522314" z3="-2.80290204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15894744" y3="1.21762125" z3="-0.92662879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87879997" y3="2.46262633" z3="-2.94604877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5435027" y3="2.25286244" z3="-3.61557869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87114264" y3="2.56681109" z3="-3.78358839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81685083" y3="2.52819809" z3="-4.38346954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.19380924" y3="3.09469774" z3="-4.6857942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36206444" y3="3.13706731" z3="-3.28362658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.23936692" y3="3.54761314" z3="-4.06107646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1552073" y3="4.14835075" z3="-2.67101022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.88220423" y3="5.48135479" z3="-2.86593135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.98984847" y3="3.85927526" z3="-2.03036227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.50756239" y3="6.23704895" z3="-2.38244399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="1.99154161" y3="4.9345644" z3="-4.25694862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.79732182" y3="5.88450533" z3="-3.68021166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.13428458" y3="5.23128478" z3="-4.86913299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.5948893" y3="6.94823673" z3="-3.83397984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.46776612" y3="-2.1666697" z3="-0.30993535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44508192" y3="-2.96614762" z3="-1.06988969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-4.99927529" y3="-2.53655897" z3="0.58137327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07609813" y3="-1.34567631" z3="-0.73495877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1605035" y3="-1.41805784" z3="-1.16895571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29046438" y3="-0.37942668" z3="-1.52504774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08539952" y3="-1.54768652" z3="-0.96311938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40631731" y3="-2.07779589" z3="-2.01485609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3479,.0196,-.1969;7.3941,.154,.4084;6.6497,.4276,-.3456;4.7168,1.2226,-2.2504;4.3893,.4035,-1.1828;2.718,.8277,-3.651;3.6128,1.7334,-3.1122;1.3473,2.5702,-4.5744;1.5442,1.2279,-4.356;.4634,2.9039,-5.1269;2.9297,-.5031,-3.4469;3.104,-.0014,-1.0015;2.4097,-1.1356,-2.0135;.9381,-1.0095,-1.837;3.1132,-2.4607,-1.8737;-.1392,-3.6048,.6661;-.0348,-5.2984,-4.7355;-.2587,-5.0306,-3.6994;-.8449,-4.312,-1.0846;.7709,-4.6235,-2.853;-1.5741,-5.1059,-3.2377;-1.8677,-4.7413,-1.9261;.4898,-4.2793,-1.5293;1.804,-4.5555,-3.2028;-2.3771,-5.419,-3.9085;-2.9038,-4.7679,-1.5802;-1.0294,-3.8486,.2319;-2.1678,-3.6226,.8762;-3.0587,-4.0836,.4473;-2.1619,-3.4738,2.3419;-2.2193,-3.2613,5.138;-3.3609,-3.6578,3.0465;-.9916,-3.19,3.0616;-1.0177,-3.0844,4.4493;-3.3887,-3.5538,4.4344;-4.2775,-3.8935,2.5001;-.0298,-3.0744,2.5566;-.0851,-2.8868,4.987;-4.3284,-3.7098,4.9705;-2.2387,-3.1873,6.229;1.4159,-3.9152,-.6312;2.1778,-3.4242,-1.0909;.5147,.217,-4.7081;-3.0654,-1.6979,.0041;-2.8829,-.9371,1.1582;-1.8152,-.2939,1.4846;-.3345,.5719,1.1934;-.3926,1.4517,-.4441;1.01,-.6877,1.4017;-.3329,1.7821,2.6231;-3.8576,-.9092,2.0561;-3.6242,-.2822,3.3071;-.1645,.7473,-1.2618;.3965,2.2275,-.4483;-1.3634,1.9505,-.6131;1.0228,-1.0463,2.4446;1.9886,-.2317,1.173;.8902,-1.5332,.7052;-.4027,1.2554,3.5917;.605,2.3666,2.6245;-1.1718,2.4978,2.5543;-2.767,-.7401,3.8258;-4.5411,-.4402,3.8903;-3.4428,.7971,3.1736;4.8567,-.7476,.9825;4.4148,-2.0684,.8343;3.761,-2.7163,1.875;3.5676,-2.0313,3.0709;4.0658,-.7482,3.2765;4.7181,-.1133,2.2243;4.5081,-2.5589,-.136;3.3514,-3.7186,1.7442;2.7036,-2.6285,4.0943;3.8975,-.2456,4.2298;5.0744,.9132,2.3476;-.8077,.4282,-4.2956;-1.7802,-.5445,-4.4866;-1.4191,-1.7328,-5.1106;-.127,-1.9542,-5.5771;.8377,-.9779,-5.3673;-1.0635,1.3479,-3.7627;-2.8028,-.4054,-4.1355;-2.4232,-2.7887,-5.2602;.1133,-2.8921,-6.0778;1.863,-1.1568,-5.6942;2.3942,-1.9404,5.0481;2.306,-3.7608,3.9149;-2.1858,-3.6914,-6.0338;-3.4334,-2.7077,-4.5898;7.0627,1.1684,-1.4864;6.0948,1.5592,-2.4572;8.4269,1.5176,-1.6829;8.8257,2.2052,-2.8029;9.1589,1.2176,-.9266;9.8788,2.4626,-2.946;6.5435,2.2529,-3.6156;7.8711,2.5668,-3.7836;5.8169,2.5282,-4.3835;8.1938,3.0947,-4.6858;3.3621,3.1371,-3.2836;2.2394,3.5476,-4.0611;4.1552,4.1484,-2.671;3.8822,5.4814,-2.8659;4.9898,3.8593,-2.0304;4.5076,6.237,-2.3824;1.9915,4.9346,-4.2569;2.7973,5.8845,-3.6802;1.1343,5.2313,-4.8691;2.5949,6.9482,-3.834;-4.4678,-2.1667,-.3099;-4.4451,-2.9661,-1.0699;-4.9993,-2.5366,.5814;-5.0761,-1.3457,-.735;-2.1605,-1.4181,-1.169;-2.2905,-.3794,-1.525;-1.0854,-1.5477,-.9631;-2.4063,-2.0778,-2.0149;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650381759287</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001065371479 0.000245293377 0.021804999209 0.005333544020</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030631653 -0.000581417 0.000061351 0.000160992 0.000215114 0.000278550 0.000410389 0.000431373 0.000592897 0.000786928 0.000936380 0.001050743 0.001264834 0.001309577 0.001358557 0.001409147 0.001665612 0.001800501 0.001846340 0.001943441 0.002167997 0.002520496 0.002562516 0.002711322 0.002853483 0.003054900 0.003271083 0.003455965 0.003885246 0.003962522 0.004422967 0.004780021 0.004836748 0.005087518 0.005933452 0.006060416 0.006308481 0.006625392 0.006839619 0.007584582 0.008041233 0.008204356 0.009235215 0.009560217 0.009992822 0.010708015 0.011066612 0.011624666 0.011681883 0.012233358 0.012863707 0.013190672 0.014009905 0.014411256 0.015016807 0.015369423 0.015692898 0.016223721 0.016850008 0.017278416 0.017526791 0.018082524 0.019381339 0.019496611 0.019930459 0.020809546 0.021216099 0.021424234 0.022435336 0.023128850 0.025157380 0.025955249 0.026738377 0.026983657 0.027454049 0.029267105 0.029469233 0.031409708 0.033271368 0.033507688 0.033874459 0.035810603 0.036812716 0.037593310 0.039626734 0.039989695 0.040759046 0.042183044 0.044187536 0.044551079 0.045327821 0.046842094 0.047652536 0.049193739 0.050293360 0.050806065 0.051034536 0.051228747 0.052478312 0.052587002 0.052874817 0.052969455 0.054667889 0.054722109 0.055593873 0.056199743 0.056496467 0.056510815 0.057027066 0.058394654 0.060302951 0.060701790 0.061613792 0.062084033 0.063175076 0.064378187 0.065112252 0.065817665 0.066335319 0.067785234 0.068922453 0.070206237 0.072674638 0.074455999 0.074522672 0.076170186 0.077888763 0.083614622 0.085203454 0.086888931 0.087239869 0.088039771 0.090411161 0.090930554 0.092982125 0.094598761 0.095245151 0.096315040 0.097323620 0.097886078 0.098881009 0.099896429 0.100266052 0.102352470 0.102865873 0.103313261 0.103451590 0.103943423 0.105709899 0.106847051 0.107393011 0.109563236 0.110541718 0.111582410 0.112520236 0.113383275 0.114933956 0.116195142 0.116634485 0.119084415 0.120759080 0.121989628 0.122971970 0.124558756 0.125527237 0.126251033 0.126960017 0.131750443 0.134958671 0.135695813 0.142726679 0.143540246 0.146949508 0.147287525 0.149636807 0.152322270 0.154718009 0.156008398 0.156644694 0.161435704 0.161817632 0.173338049 0.173983819 0.179749011 0.183997741 0.185312198 0.189268251 0.190159199 0.193923028 0.194007352 0.198341716 0.200124438 0.205095659 0.206883663 0.207239100 0.210033236 0.213824489 0.216305959 0.217603479 0.218150255 0.220636257 0.225053408 0.226224641 0.231968790 0.235001701 0.235428823 0.235815534 0.244562259 0.255937435 0.257182005 0.263439746 0.269777852 0.280323165 0.282883853 0.286201762 0.291523549 0.296654736 0.304224498 0.305646497 0.307234910 0.313946703 0.316531002 0.317335052 0.321985548 0.329667996 0.332637424 0.351725803 0.352026564 0.354815579 0.355702065 0.359930665 0.362772671 0.363630928 0.384288872 0.386018337 0.391777751 0.410597731 0.425385874 0.430231690 0.461319440 0.468620854 0.477695066 0.483040184 0.483573602 0.487446433 0.491131913 0.509225672 0.515196615 0.535148508 0.566180647 0.572861986 0.592207378 0.593579477 0.606389951 0.607911104 0.644575256 0.646738973 0.648860589 0.674252452 0.677759869 0.685140851 0.691518145 0.693373372 0.699604463 0.704387956 0.717219856 0.741226660 0.751219285 0.758855289 0.768125474 0.772514234 0.778764087 0.810609242 0.813653445 0.818856082 0.821627218 0.823369075 0.831461987 0.833474590 0.835853098 0.841580549 0.845493880 0.846933498 0.848669122 0.858921038 0.865663794 0.865894618 0.873791549 0.883311281 0.884515802 0.889518075 0.893735297 0.900706122 0.903947391 0.922885746 0.923569917 0.933687604 0.935287013 0.965619549 0.975710739 0.985945120 1.001110644 1.018258590 1.027828474 1.041638317 1.050656250 1.057406068 1.068444862 1.086566504 1.088581009 1.104244806 1.106254098 1.112284073 1.122501909 1.124359100 1.135737050 1.143564683 1.174243334 1.177617653 1.181002113 1.186389253 1.190610522 1.196125299 1.224091306 1.228095153 1.274371066 1.301416745 1.319412398 1.328083449 1.332693644 1.335313122 1.335887274 1.341863836 1.342960408 1.344897588 1.358944302 1.378584760 1.382865109 1.384155260 1.415117277 1.419700667 1.435838638 1.551465871 1.680935441 1.775777294</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">208</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34410271" y3="0.02491463" z3="-0.19596901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38931508" y3="0.15834798" z3="0.4129632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64643619" y3="0.43180791" z3="-0.34266781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71759102" y3="1.22647748" z3="-2.25184474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38740119" y3="0.4084755" z3="-1.18375662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72088987" y3="0.83121537" z3="-3.65519497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61583215" y3="1.73713577" z3="-3.11649247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35316293" y3="2.57408911" z3="-4.58358104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54844675" y3="1.23130778" z3="-4.36253029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47060828" y3="2.9069469" z3="-5.13867734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93136102" y3="-0.4996616" z3="-3.4493261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10137148" y3="0.00476068" z3="-1.00400238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40807207" y3="-1.13032002" z3="-2.0161266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93611612" y3="-1.00345285" z3="-1.84290153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11086597" y3="-2.45550338" z3="-1.87321126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13945311" y3="-3.60827255" z3="0.67028707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03507904" y3="-5.29168233" z3="-4.73494287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25883129" y3="-5.02595813" z3="-3.69828089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84505059" y3="-4.31239713" z3="-1.08191273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77045944" y3="-4.61759261" z3="-2.85214352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57400976" y3="-5.10467923" z3="-3.23561064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86782833" y3="-4.74264335" z3="-1.92337351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48958653" y3="-4.2761142" z3="-1.52770557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8023225" y3="-4.54446264" z3="-3.20222131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37670099" y3="-5.41879196" z3="-3.90629573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90351262" y3="-4.77293164" z3="-1.57669566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02973657" y3="-3.85147465" z3="0.2354359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16819453" y3="-3.62664825" z3="0.87982282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05889759" y3="-4.08709302" z3="0.44999903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16216678" y3="-3.47981546" z3="2.34571862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22060712" y3="-3.26826249" z3="5.1416742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36118147" y3="-3.66431528" z3="3.04985546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99195077" y3="-3.19689084" z3="3.06593746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01813063" y3="-3.09236963" z3="4.45362898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38978434" y3="-3.56014439" z3="4.43766662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27976584" y3="-3.89677097" z3="2.50280306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03093188" y3="-3.07974438" z3="2.5610619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08780173" y3="-2.89212189" z3="4.99120635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33182436" y3="-3.71224678" z3="4.97345049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24176426" y3="-3.19295909" z3="6.23235494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41620321" y3="-3.91109684" z3="-0.62982451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17637739" y3="-3.41815016" z3="-1.08951535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51719664" y3="0.22063874" z3="-4.71260435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06675738" y3="-1.70106973" z3="0.0082896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88547547" y3="-0.94069984" z3="1.16265007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81864051" y3="-0.29554587" z3="1.48953735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33686984" y3="0.56602519" z3="1.19424108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.3977208" y3="1.4503826" z3="-0.44099393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00524146" y3="-0.69724644" z3="1.3946243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3257779" y3="1.77284779" z3="2.62715416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86054542" y3="-0.91438133" z3="2.06004633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62784713" y3="-0.28813701" z3="3.31166986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17393673" y3="0.74721402" z3="-1.26189558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39118781" y3="2.22507369" z3="-0.44532813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36832052" y3="1.9512634" z3="-0.60512406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0220423" y3="-1.0566401" z3="2.43676416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98244455" y3="-0.24159369" z3="1.1626658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8815122" y3="-1.54173753" z3="0.69714419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39009762" y3="1.24359902" z3="3.59399361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61386579" y3="2.35498226" z3="2.62476155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16355291" y3="2.48954133" z3="2.56574319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76992177" y3="-0.74587828" z3="3.82993442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54463991" y3="-0.44791214" z3="3.89453021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44851037" y3="0.79128967" z3="3.17927865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85175158" y3="-0.74226093" z3="0.9829651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41385489" y3="-2.0644826" z3="0.83455052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76121188" y3="-2.71423051" z3="1.87485732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56441363" y3="-2.02938246" z3="3.0705417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05730624" y3="-0.74423462" z3="3.27570243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70916199" y3="-0.10764085" z3="2.22427375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50835925" y3="-2.55457629" z3="-0.1365364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35418107" y3="-3.71784062" z3="1.74339532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70063416" y3="-2.62895955" z3="4.0926504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88449118" y3="-0.24130835" z3="4.22739423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06172275" y3="0.92010022" z3="2.34744961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80421022" y3="0.43382054" z3="-4.2973552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77792511" y3="-0.53807999" z3="-4.48407645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42002124" y3="-1.72778683" z3="-5.10734576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1293884" y3="-1.9514978" z3="-5.57660107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83710859" y3="-0.9754279" z3="-5.36848007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05700442" y3="1.35461404" z3="-3.76625633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79980801" y3="-0.3976755" z3="-4.13053916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42541222" y3="-2.78205863" z3="-5.25225004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10988649" y3="-2.89038672" z3="-6.07690397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8619389" y3="-1.15551867" z3="-5.69771473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38558068" y3="-1.94106013" z3="5.04369892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30771534" y3="-3.76295989" z3="3.91394826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19090152" y3="-3.68577046" z3="-6.02609515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43372564" y3="-2.6988522" z3="-4.57967384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0620086" y3="1.17124714" z3="-1.48343238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09647805" y3="1.56193177" z3="-2.45646576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42673173" y3="1.51868776" z3="-1.67765483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82817425" y3="2.20405176" z3="-2.7979689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15683589" y3="1.21914998" z3="-0.91942791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88179825" y3="2.4614747" z3="-2.93911129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54795953" y3="2.25301509" z3="-3.61524422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87584782" y3="2.5646263" z3="-3.78125469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82300675" y3="2.52735139" z3="-4.38514512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20061584" y3="3.08928057" z3="-4.68389868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.36742446" y3="3.14063081" z3="-3.29202105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.24660036" y3="3.55100551" z3="-4.07239585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16130234" y3="4.15220108" z3="-2.68105994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.89094582" y3="5.48519231" z3="-2.88031434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99408049" y3="3.86373" z3="-2.03775654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.51648226" y3="6.24154949" z3="-2.39740237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.00234728" y3="4.93712453" z3="-4.27392176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.80847637" y3="5.8877393" z3="-3.6980739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.14658611" y3="5.2335918" z3="-4.88841158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.60860623" y3="6.95113299" z3="-3.85578483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4683499" y3="-2.17155093" z3="-0.30606682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44455622" y3="-2.97198549" z3="-1.06513717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00035904" y3="-2.540906" z3="0.58555476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.07642276" y3="-1.35104388" z3="-0.73210029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16179937" y3="-1.42038103" z3="-1.16471339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29086582" y3="-0.38121543" z3="-1.52031943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.08537244" y3="-1.55248043" z3="-0.9598901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40703615" y3="-2.07995499" z3="-2.01036436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3441,.0249,-.196;7.3893,.1583,.413;6.6464,.4318,-.3427;4.7176,1.2265,-2.2518;4.3874,.4085,-1.1838;2.7209,.8312,-3.6552;3.6158,1.7371,-3.1165;1.3532,2.5741,-4.5836;1.5484,1.2313,-4.3625;.4706,2.9069,-5.1387;2.9314,-.4997,-3.4493;3.1014,.0048,-1.004;2.4081,-1.1303,-2.0161;.9361,-1.0035,-1.8429;3.1109,-2.4555,-1.8732;-.1395,-3.6083,.6703;-.0351,-5.2917,-4.7349;-.2588,-5.026,-3.6983;-.8451,-4.3124,-1.0819;.7705,-4.6176,-2.8521;-1.574,-5.1047,-3.2356;-1.8678,-4.7426,-1.9234;.4896,-4.2761,-1.5277;1.8023,-4.5445,-3.2022;-2.3767,-5.4188,-3.9063;-2.9035,-4.7729,-1.5767;-1.0297,-3.8515,.2354;-2.1682,-3.6266,.8798;-3.0589,-4.0871,.45;-2.1622,-3.4798,2.3457;-2.2206,-3.2683,5.1417;-3.3612,-3.6643,3.0499;-.992,-3.1969,3.0659;-1.0181,-3.0924,4.4536;-3.3898,-3.5601,4.4377;-4.2798,-3.8968,2.5028;-.0309,-3.0797,2.5611;-.0878,-2.8921,4.9912;-4.3318,-3.7122,4.9735;-2.2418,-3.193,6.2324;1.4162,-3.9111,-.6298;2.1764,-3.4182,-1.0895;.5172,.2206,-4.7126;-3.0668,-1.7011,.0083;-2.8855,-.9407,1.1627;-1.8186,-.2955,1.4895;-.3369,.566,1.1942;-.3977,1.4504,-.441;1.0052,-.6972,1.3946;-.3258,1.7728,2.6272;-3.8605,-.9144,2.06;-3.6278,-.2881,3.3117;-.1739,.7472,-1.2619;.3912,2.2251,-.4453;-1.3683,1.9513,-.6051;1.022,-1.0566,2.4368;1.9824,-.2416,1.1627;.8815,-1.5417,.6971;-.3901,1.2436,3.594;.6139,2.355,2.6248;-1.1636,2.4895,2.5657;-2.7699,-.7459,3.8299;-4.5446,-.4479,3.8945;-3.4485,.7913,3.1793;4.8518,-.7423,.983;4.4139,-2.0645,.8346;3.7612,-2.7142,1.8749;3.5644,-2.0294,3.0705;4.0573,-.7442,3.2757;4.7092,-.1076,2.2243;4.5084,-2.5546,-.1365;3.3542,-3.7178,1.7434;2.7006,-2.629,4.0927;3.8845,-.2413,4.2274;5.0617,.9201,2.3474;-.8042,.4338,-4.2974;-1.7779,-.5381,-4.4841;-1.42,-1.7278,-5.1073;-.1294,-1.9515,-5.5766;.8371,-.9754,-5.3685;-1.057,1.3546,-3.7663;-2.7998,-.3977,-4.1305;-2.4254,-2.7821,-5.2523;.1099,-2.8904,-6.0769;1.8619,-1.1555,-5.6977;2.3856,-1.9411,5.0437;2.3077,-3.763,3.9139;-2.1909,-3.6858,-6.0261;-3.4337,-2.6989,-4.5797;7.062,1.1712,-1.4834;6.0965,1.5619,-2.4565;8.4267,1.5187,-1.6777;8.8282,2.2041,-2.798;9.1568,1.2191,-.9194;9.8818,2.4615,-2.9391;6.548,2.253,-3.6152;7.8758,2.5646,-3.7813;5.823,2.5274,-4.3851;8.2006,3.0893,-4.6839;3.3674,3.1406,-3.292;2.2466,3.551,-4.0724;4.1613,4.1522,-2.6811;3.8909,5.4852,-2.8803;4.9941,3.8637,-2.0378;4.5165,6.2415,-2.3974;2.0023,4.9371,-4.2739;2.8085,5.8877,-3.6981;1.1466,5.2336,-4.8884;2.6086,6.9511,-3.8558;-4.4683,-2.1716,-.3061;-4.4446,-2.972,-1.0651;-5.0004,-2.5409,.5856;-5.0764,-1.351,-.7321;-2.1618,-1.4204,-1.1647;-2.2909,-.3812,-1.5203;-1.0854,-1.5525,-.9599;-2.407,-2.08,-2.0104;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650388930484</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001588096557 0.000280058981 0.022692309524 0.005336409212</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030633392 -0.000480685 0.000091439 0.000158612 0.000197211 0.000292466 0.000410954 0.000430720 0.000592939 0.000786391 0.000936559 0.001051122 0.001269293 0.001310408 0.001359831 0.001410364 0.001665918 0.001800406 0.001847095 0.001945353 0.002168026 0.002520454 0.002563127 0.002715284 0.002856569 0.003054583 0.003271131 0.003455853 0.003889167 0.003962472 0.004429399 0.004780042 0.004837125 0.005090695 0.005940370 0.006066626 0.006311209 0.006627291 0.006839628 0.007586133 0.008041908 0.008203811 0.009237985 0.009560116 0.009994287 0.010716607 0.011074917 0.011628482 0.011681787 0.012248079 0.012864856 0.013194731 0.014010200 0.014411254 0.015019634 0.015373740 0.015694539 0.016226995 0.016850581 0.017291021 0.017527938 0.018096312 0.019381618 0.019498153 0.019930779 0.020809679 0.021217000 0.021426625 0.022437537 0.023129431 0.025163535 0.025960436 0.026741433 0.026984401 0.027455279 0.029268151 0.029477166 0.031410220 0.033275313 0.033508135 0.033876096 0.035810981 0.036813428 0.037600288 0.039633065 0.039990308 0.040759145 0.042201519 0.044234395 0.044630054 0.045345061 0.046845098 0.047652430 0.049197191 0.050293254 0.050806079 0.051034490 0.051228833 0.052478473 0.052589385 0.052875964 0.052977368 0.054674840 0.054725422 0.055621632 0.056199992 0.056496631 0.056514796 0.057027294 0.058395788 0.060307082 0.060705328 0.061614993 0.062089307 0.063175082 0.064378230 0.065112399 0.065820746 0.066335786 0.067785287 0.068927431 0.070215556 0.072677101 0.074456102 0.074527322 0.076171207 0.077897939 0.083616439 0.085214223 0.086889850 0.087243568 0.088040576 0.090412254 0.090933117 0.092984830 0.094598804 0.095248566 0.096315028 0.097327888 0.097886671 0.098881135 0.099898426 0.100266803 0.102357390 0.102890659 0.103314620 0.103460409 0.103943012 0.105716119 0.106848789 0.107394614 0.109563233 0.110542103 0.111599061 0.112525938 0.113467021 0.114933982 0.116197378 0.116637094 0.119093077 0.120759506 0.121993614 0.122985507 0.124559643 0.125531463 0.126252222 0.126961401 0.131755214 0.134958491 0.135705226 0.142727338 0.143543712 0.146951718 0.147291511 0.149644579 0.152337639 0.154720009 0.156009265 0.156649093 0.161453038 0.161821886 0.173337868 0.173993135 0.179762971 0.184006122 0.185328873 0.189268227 0.190159276 0.193926687 0.194017486 0.198341867 0.200126644 0.205097095 0.206884605 0.207239060 0.210044953 0.213833903 0.216317696 0.217603632 0.218150242 0.220644717 0.225061559 0.226224658 0.231975841 0.235006839 0.235429247 0.235826584 0.244563598 0.255940841 0.257187441 0.263444424 0.269778438 0.280324053 0.282883835 0.286201955 0.291528672 0.296662745 0.304235108 0.305650313 0.307239744 0.313948077 0.316557761 0.317335254 0.321985569 0.329668977 0.332655074 0.351726587 0.352028991 0.354815812 0.355706031 0.359938496 0.362775366 0.363631334 0.384289687 0.386022240 0.391806957 0.410607851 0.425387569 0.430233154 0.461462417 0.468625310 0.477726672 0.483146307 0.483573649 0.487452327 0.491142356 0.509242307 0.515203008 0.535151527 0.566184002 0.572887202 0.592211132 0.593579644 0.606402124 0.607938336 0.644576361 0.646743930 0.648863882 0.674253221 0.677761178 0.685170302 0.691518742 0.693381953 0.699612777 0.704391354 0.717220688 0.741235249 0.751220684 0.758855329 0.768173322 0.772516523 0.778765501 0.810626133 0.813684810 0.818869816 0.821629149 0.823378838 0.831465710 0.833517987 0.835854050 0.841632314 0.845503602 0.846934206 0.848676252 0.858921116 0.865712766 0.865895825 0.873791570 0.883416784 0.884516034 0.889521344 0.893775449 0.900710336 0.903967951 0.922911488 0.923572017 0.933687867 0.935302120 0.965621403 0.975710824 0.985951405 1.001113948 1.018260172 1.027850938 1.041661652 1.050661615 1.057407067 1.068460013 1.086567376 1.088583201 1.104246405 1.106257918 1.112287440 1.122501879 1.124362913 1.135742074 1.143592601 1.174249242 1.177795443 1.181004600 1.186410792 1.190692796 1.196125512 1.224117320 1.228121571 1.274423246 1.301417577 1.319419585 1.328083675 1.332707457 1.335339401 1.335899406 1.341867031 1.342978540 1.344901750 1.358951426 1.378589808 1.382865751 1.384171759 1.415142691 1.419701014 1.435870466 1.551466768 1.680989652 1.775827040</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">209</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34128367" y3="0.02941865" z3="-0.19460103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38582121" y3="0.16199209" z3="0.41697181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64428764" y3="0.43478105" z3="-0.34020418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71882634" y3="1.22690038" z3="-2.25396983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38629324" y3="0.41245134" z3="-1.1841807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72238687" y3="0.83223232" z3="-3.65784639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61892236" y3="1.73749483" z3="-3.1210831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35904077" y3="2.5750209" z3="-4.59212461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55083528" y3="1.23308999" z3="-4.36626477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47702833" y3="2.90892365" z3="-5.1473619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93013889" y3="-0.49826121" z3="-3.44894016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09956355" y3="0.01112994" z3="-1.00488046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40682243" y3="-1.12600675" z3="-2.01479947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93481794" y3="-0.99955131" z3="-1.84222391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11052988" y3="-2.45049211" z3="-1.86931066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14021024" y3="-3.6074349" z3="0.6701029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03147863" y3="-5.28446403" z3="-4.73614436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25629063" y3="-5.01975164" z3="-3.69944959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84442836" y3="-4.31034891" z3="-1.08279093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77203637" y3="-4.61120561" z3="-2.85234366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57134396" y3="-5.10055469" z3="-3.23783193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86607598" y3="-4.74060805" z3="-1.92523354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49000967" y3="-4.27137321" z3="-1.52772147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80503562" y3="-4.53920574" z3="-3.20221254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37316976" y3="-5.41470013" z3="-3.90941104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90206625" y3="-4.77170943" z3="-1.57911183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02987067" y3="-3.85189679" z3="0.23533047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16845515" y3="-3.6295666" z3="0.88024759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05875587" y3="-4.09025207" z3="0.44980227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16291902" y3="-3.48454289" z3="2.34622869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22068945" y3="-3.28018246" z3="5.1428533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36177772" y3="-3.67205895" z3="3.05007738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99308669" y3="-3.20139952" z3="3.06693258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01962746" y3="-3.09927271" z3="4.45479304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38948942" y3="-3.57247808" z3="4.43831777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27823211" y3="-3.90704231" z3="2.50289146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03068363" y3="-3.08472128" z3="2.5623507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08738398" y3="-2.90148835" z3="4.99298796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32812206" y3="-3.73266878" z3="4.973721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24015563" y3="-3.20942726" z3="6.23405142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41462838" y3="-3.90587353" z3="-0.62871713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17631701" y3="-3.41290877" z3="-1.08755922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5176848" y3="0.22397106" z3="-4.71280387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.06930073" y3="-1.70344011" z3="0.01233151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88877588" y3="-0.94457032" z3="1.16776124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82431231" y3="-0.29617727" z3="1.49440467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34142013" y3="0.56400128" z3="1.19643325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40501267" y3="1.45016538" z3="-0.43762738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00005825" y3="-0.70062965" z3="1.39287409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32656723" y3="1.769194" z3="2.6304861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86236318" y3="-0.92260711" z3="2.06694436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62857132" y3="-0.29904458" z3="3.31973863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17958236" y3="0.74946714" z3="-1.25900413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3846948" y3="2.22518258" z3="-0.44126195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37581134" y3="1.95070892" z3="-0.60136916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01803264" y3="-1.06085585" z3="2.43508836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97830718" y3="-0.24624419" z3="1.15961521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87445293" y3="-1.54484406" z3="0.69561419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39121105" y3="1.2394587" z3="3.59772551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61344167" y3="2.35045124" z3="2.62721519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16343698" y3="2.48805341" z3="2.57008403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76871834" y3="-0.7557659" z3="3.83519087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54368353" y3="-0.46220211" z3="3.90449305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4512533" y3="0.7810705" z3="3.18960941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84703918" y3="-0.73623555" z3="0.98449833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41250742" y3="-2.05964946" z3="0.83778677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7600433" y3="-2.70930604" z3="1.878175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56018682" y3="-2.02312069" z3="3.07236784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04968288" y3="-0.7363076" z3="3.2761715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70092158" y3="-0.09979936" z3="2.22433577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51101248" y3="-2.55149518" z3="-0.13111819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35647265" y3="-3.71426452" z3="1.74850228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69828304" y3="-2.62374231" z3="4.09545206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87602025" y3="-0.23273412" z3="4.22809303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05107512" y3="0.92893325" z3="2.34635984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80297172" y3="0.4390698" z3="-4.29650214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77833857" y3="-0.53174256" z3="-4.48096292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42223409" y3="-1.72212785" z3="-5.10423514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13218127" y3="-1.9475859" z3="-5.57486143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83575072" y3="-0.97327881" z3="-5.36972428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05492523" y3="1.3608643" z3="-3.7649206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79954805" y3="-0.38945365" z3="-4.12684517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.42955682" y3="-2.7757267" z3="-5.24968081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10405206" y3="-2.88691129" z3="-6.07455595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85968971" y3="-1.15534369" z3="-5.69935681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38285468" y3="-1.93569887" z3="5.04735053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30809327" y3="-3.7590303" z3="3.91751435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.19719296" y3="-3.67954625" z3="-6.0233751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43740515" y3="-2.69152683" z3="-4.57609179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.062276" y3="1.17128789" z3="-1.48196462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09838695" y3="1.55963919" z3="-2.45762366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42776357" y3="1.5180415" z3="-1.67467642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83162037" y3="2.20066594" z3="-2.79596252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15653118" y3="1.22001506" z3="-0.91451994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88545564" y3="2.45606462" z3="-2.93618336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55241975" y3="2.24726046" z3="-3.6175468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88114294" y3="2.55902376" z3="-3.78186565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82895366" y3="2.5200948" z3="-4.38935417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20787151" y3="3.08252738" z3="-4.68518312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37358596" y3="3.14130223" z3="-3.3006286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25436487" y3="3.55188728" z3="-4.0831591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16913604" y3="4.15322321" z3="-2.69214445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9026496" y3="5.48616338" z3="-2.89674601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00068136" y3="3.86484181" z3="-2.04717637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.52995124" y3="6.24243443" z3="-2.41637379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01310043" y3="4.93867639" z3="-4.28876366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82187748" y3="5.88878901" z3="-3.71673407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15862968" y3="5.23514015" z3="-4.90500349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62487357" y3="6.95235594" z3="-3.87847714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47033885" y3="-2.17541256" z3="-0.30239685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44570426" y3="-2.97425848" z3="-1.06289512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00118829" y3="-2.54732602" z3="0.58843766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08020794" y3="-1.35543593" z3="-0.72694631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16512499" y3="-1.41938932" z3="-1.16035017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29744347" y3="-0.38040142" z3="-1.51421109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0903497" y3="-1.54671867" z3="-0.95482171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41054698" y3="-2.07739547" z3="-2.00803079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3413,.0294,-.1946;7.3858,.162,.417;6.6443,.4348,-.3402;4.7188,1.2269,-2.254;4.3863,.4125,-1.1842;2.7224,.8322,-3.6578;3.6189,1.7375,-3.1211;1.359,2.575,-4.5921;1.5508,1.2331,-4.3663;.477,2.9089,-5.1474;2.9301,-.4983,-3.4489;3.0996,.0111,-1.0049;2.4068,-1.126,-2.0148;.9348,-.9996,-1.8422;3.1105,-2.4505,-1.8693;-.1402,-3.6074,.6701;-.0315,-5.2845,-4.7361;-.2563,-5.0198,-3.6994;-.8444,-4.3103,-1.0828;.772,-4.6112,-2.8523;-1.5713,-5.1006,-3.2378;-1.8661,-4.7406,-1.9252;.49,-4.2714,-1.5277;1.805,-4.5392,-3.2022;-2.3732,-5.4147,-3.9094;-2.9021,-4.7717,-1.5791;-1.0299,-3.8519,.2353;-2.1685,-3.6296,.8802;-3.0588,-4.0903,.4498;-2.1629,-3.4845,2.3462;-2.2207,-3.2802,5.1429;-3.3618,-3.6721,3.0501;-.9931,-3.2014,3.0669;-1.0196,-3.0993,4.4548;-3.3895,-3.5725,4.4383;-4.2782,-3.907,2.5029;-.0307,-3.0847,2.5624;-.0874,-2.9015,4.993;-4.3281,-3.7327,4.9737;-2.2402,-3.2094,6.2341;1.4146,-3.9059,-.6287;2.1763,-3.4129,-1.0876;.5177,.224,-4.7128;-3.0693,-1.7034,.0123;-2.8888,-.9446,1.1678;-1.8243,-.2962,1.4944;-.3414,.564,1.1964;-.405,1.4502,-.4376;1.0001,-.7006,1.3929;-.3266,1.7692,2.6305;-3.8624,-.9226,2.0669;-3.6286,-.299,3.3197;-.1796,.7495,-1.259;.3847,2.2252,-.4413;-1.3758,1.9507,-.6014;1.018,-1.0609,2.4351;1.9783,-.2462,1.1596;.8745,-1.5448,.6956;-.3912,1.2395,3.5977;.6134,2.3505,2.6272;-1.1634,2.4881,2.5701;-2.7687,-.7558,3.8352;-4.5437,-.4622,3.9045;-3.4513,.7811,3.1896;4.847,-.7362,.9845;4.4125,-2.0596,.8378;3.76,-2.7093,1.8782;3.5602,-2.0231,3.0724;4.0497,-.7363,3.2762;4.7009,-.0998,2.2243;4.511,-2.5515,-.1311;3.3565,-3.7143,1.7485;2.6983,-2.6237,4.0955;3.876,-.2327,4.2281;5.0511,.9289,2.3464;-.803,.4391,-4.2965;-1.7783,-.5317,-4.481;-1.4222,-1.7221,-5.1042;-.1322,-1.9476,-5.5749;.8358,-.9733,-5.3697;-1.0549,1.3609,-3.7649;-2.7995,-.3895,-4.1268;-2.4296,-2.7757,-5.2497;.1041,-2.8869,-6.0746;1.8597,-1.1553,-5.6994;2.3829,-1.9357,5.0474;2.3081,-3.759,3.9175;-2.1972,-3.6795,-6.0234;-3.4374,-2.6915,-4.5761;7.0623,1.1713,-1.482;6.0984,1.5596,-2.4576;8.4278,1.518,-1.6747;8.8316,2.2007,-2.796;9.1565,1.22,-.9145;9.8855,2.4561,-2.9362;6.5524,2.2473,-3.6175;7.8811,2.559,-3.7819;5.829,2.5201,-4.3894;8.2079,3.0825,-4.6852;3.3736,3.1413,-3.3006;2.2544,3.5519,-4.0832;4.1691,4.1532,-2.6921;3.9026,5.4862,-2.8967;5.0007,3.8648,-2.0472;4.53,6.2424,-2.4164;2.0131,4.9387,-4.2888;2.8219,5.8888,-3.7167;1.1586,5.2351,-4.905;2.6249,6.9524,-3.8785;-4.4703,-2.1754,-.3024;-4.4457,-2.9743,-1.0629;-5.0012,-2.5473,.5884;-5.0802,-1.3554,-.7269;-2.1651,-1.4194,-1.1604;-2.2974,-.3804,-1.5142;-1.0903,-1.5467,-.9548;-2.4105,-2.0774,-2.008;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650398344309</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001554732726 0.000304069624 0.020401850817 0.005333695043</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030635362 -0.000629973 -0.000040968 0.000106944 0.000169061 0.000279817 0.000411853 0.000428217 0.000589659 0.000792832 0.000934973 0.001051122 0.001276999 0.001332684 0.001358393 0.001412409 0.001651038 0.001801764 0.001845573 0.001948632 0.002168325 0.002507569 0.002563459 0.002725445 0.002860679 0.003045790 0.003267526 0.003457173 0.003877467 0.003962902 0.004435021 0.004775758 0.004839233 0.005092628 0.005962561 0.006046783 0.006312389 0.006632907 0.006838518 0.007588087 0.008047623 0.008203256 0.009237979 0.009548971 0.009996297 0.010658640 0.011026697 0.011592199 0.011649271 0.012224485 0.012861709 0.013200808 0.014009568 0.014411765 0.015021292 0.015379350 0.015692040 0.016231664 0.016846965 0.017364546 0.017542469 0.018099704 0.019384564 0.019497927 0.019935830 0.020810390 0.021204299 0.021421664 0.022439358 0.023130744 0.025177921 0.025967508 0.026746320 0.026985718 0.027455715 0.029269317 0.029491234 0.031404628 0.033281283 0.033502084 0.033882043 0.035813035 0.036823875 0.037596062 0.039642194 0.039980809 0.040771867 0.042233880 0.044275333 0.044774952 0.045370098 0.046849506 0.047655902 0.049201072 0.050295287 0.050808434 0.051033809 0.051229659 0.052478506 0.052592344 0.052875840 0.052995619 0.054684092 0.054735152 0.055681375 0.056200717 0.056495886 0.056524282 0.057027671 0.058392545 0.060312402 0.060725999 0.061615499 0.062099080 0.063176162 0.064378201 0.065113730 0.065821438 0.066336268 0.067790870 0.068934287 0.070228967 0.072682063 0.074456527 0.074528574 0.076176291 0.077916084 0.083617381 0.085245400 0.086890260 0.087246986 0.088048550 0.090409871 0.090932851 0.092987952 0.094599111 0.095253684 0.096315236 0.097335502 0.097887348 0.098873127 0.099898995 0.100269584 0.102361058 0.102921638 0.103313963 0.103471112 0.103944615 0.105723045 0.106851661 0.107393909 0.109566841 0.110552920 0.111619708 0.112531517 0.113617741 0.114933418 0.116209502 0.116693289 0.119147065 0.120761605 0.121994813 0.122998164 0.124563744 0.125547178 0.126252780 0.126959366 0.131760975 0.134969729 0.135716970 0.142723666 0.143550107 0.146954953 0.147299391 0.149655028 0.152355285 0.154727681 0.156013395 0.156646824 0.161484903 0.161824641 0.173335343 0.173998100 0.179785781 0.184019403 0.185337550 0.189271469 0.190157140 0.193934877 0.194032599 0.198341852 0.200133194 0.205102269 0.206887016 0.207239507 0.210047232 0.213844508 0.216316932 0.217607170 0.218152778 0.220661306 0.225092177 0.226224885 0.231992076 0.235011129 0.235429241 0.235849230 0.244562281 0.255944881 0.257203435 0.263456734 0.269780085 0.280330362 0.282884699 0.286203115 0.291532423 0.296666483 0.304257419 0.305658383 0.307246048 0.313981780 0.316592434 0.317329345 0.321986636 0.329669703 0.332684926 0.351730434 0.352054747 0.354816092 0.355716329 0.359956301 0.362775470 0.363634038 0.384290844 0.386048703 0.391838996 0.410611711 0.425393293 0.430234797 0.461577304 0.468633450 0.477840825 0.483397615 0.483587132 0.487494007 0.491149694 0.509250014 0.515210538 0.535166345 0.566187197 0.572965321 0.592228176 0.593580376 0.606408554 0.607938777 0.644576555 0.646745757 0.648867353 0.674255331 0.677765893 0.685211903 0.691519383 0.693432858 0.699619087 0.704399042 0.717225684 0.741240421 0.751223083 0.758857828 0.768262808 0.772521652 0.778768639 0.810629509 0.813769918 0.818884574 0.821631144 0.823384831 0.831463837 0.833562795 0.835857696 0.841684473 0.845512375 0.846941479 0.848687683 0.858923162 0.865820749 0.865908687 0.873795283 0.883467856 0.884522462 0.889519817 0.893910831 0.900710137 0.903976923 0.922941598 0.923575039 0.933691170 0.935336228 0.965651628 0.975715271 0.985951276 1.001116803 1.018261409 1.027863120 1.041677486 1.050676843 1.057411349 1.068480416 1.086572255 1.088584838 1.104249248 1.106267666 1.112291460 1.122526373 1.124364636 1.135741938 1.143605810 1.174265674 1.177968614 1.181009629 1.186430204 1.190863308 1.196126102 1.224152906 1.228166208 1.274612749 1.301418736 1.319425262 1.328086415 1.332768065 1.335383119 1.335925540 1.341869868 1.342999104 1.344906559 1.358964128 1.378613850 1.382866947 1.384183278 1.415180089 1.419701935 1.435918550 1.551467336 1.681261764 1.775875837</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">210</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33791667" y3="0.03441567" z3="-0.19297543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38169612" y3="0.16395708" z3="0.42059177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64158592" y3="0.43702723" z3="-0.33782914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7199116" y3="1.22997875" z3="-2.25483015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38464318" y3="0.41728538" z3="-1.1841787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72413811" y3="0.83605033" z3="-3.65996972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62179993" y3="1.74090383" z3="-3.12394703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36443051" y3="2.5798253" z3="-4.59833254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5537332" y3="1.23765666" z3="-4.36969844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48357519" y3="2.91346821" z3="-5.15571566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.93008037" y3="-0.49487991" z3="-3.44984139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09706003" y3="0.01743625" z3="-1.00587915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40468211" y3="-1.12068375" z3="-2.01532573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9324885" y3="-0.99372696" z3="-1.84426229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10799767" y3="-2.44516971" z3="-1.86770686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13894601" y3="-3.61281343" z3="0.6727105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03061864" y3="-5.27592198" z3="-4.73824138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25510738" y3="-5.01419089" z3="-3.70072048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84351941" y3="-4.31089283" z3="-1.08216517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77323986" y3="-4.6061805" z3="-2.85308687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57025938" y3="-5.09759405" z3="-3.23859864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86513826" y3="-4.74092549" z3="-1.92513301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49110865" y3="-4.26943593" z3="-1.5276451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80481536" y3="-4.52898181" z3="-3.20271157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37241629" y3="-5.41105702" z3="-3.9105637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90068358" y3="-4.77534669" z3="-1.57865451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.029164" y3="-3.85500004" z3="0.23674565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16794283" y3="-3.63421433" z3="0.88197765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05777594" y3="-4.09534111" z3="0.45118661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16139584" y3="-3.49213332" z3="2.34840765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21837676" y3="-3.29088173" z3="5.14524991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35913683" y3="-3.68340092" z3="3.052745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99173077" y3="-3.20735545" z3="3.06881154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01698817" y3="-3.10821794" z3="4.45699391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38716756" y3="-3.58428553" z3="4.44096215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27659203" y3="-3.91802689" z3="2.50551053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03223176" y3="-3.08370493" z3="2.56374285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08680274" y3="-2.90651245" z3="4.99474981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32861409" y3="-3.74115511" z3="4.97700516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23874714" y3="-3.21982093" z3="6.23626786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4161551" y3="-3.90415697" z3="-0.62831818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17558916" y3="-3.40828897" z3="-1.08646917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5190095" y3="0.22872988" z3="-4.71532166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07135004" y3="-1.70856855" z3="0.01645703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89121731" y3="-0.95018036" z3="1.17266784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82713754" y3="-0.29989747" z3="1.49885757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34674632" y3="0.5625802" z3="1.19733276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41522814" y3="1.45008399" z3="-0.43597346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99637937" y3="-0.70074681" z3="1.39072476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33071788" y3="1.76790696" z3="2.63135872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86432923" y3="-0.93111226" z3="2.07241621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63152527" y3="-0.30907078" z3="3.32606618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18800263" y3="0.75048656" z3="-1.25893863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36918222" y3="2.22959596" z3="-0.43894678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38898924" y3="1.94531973" z3="-0.59783339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01717256" y3="-1.06112754" z3="2.43268032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97268032" y3="-0.24452748" z3="1.15568806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8704237" y3="-1.54470698" z3="0.6931937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39272149" y3="1.23813398" z3="3.59837813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60901031" y3="2.34975176" z3="2.62637649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16840533" y3="2.48508656" z3="2.57240363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7711328" y3="-0.76626721" z3="3.84081108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54668525" y3="-0.47436142" z3="3.90991203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45547752" y3="0.77161293" z3="3.19773032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84233239" y3="-0.73028416" z3="0.98628083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40917971" y3="-2.05428653" z3="0.83986032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75796476" y3="-2.70444687" z3="1.8808391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55752938" y3="-2.01807558" z3="3.07506835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04427884" y3="-0.73023408" z3="3.27782101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69484748" y3="-0.09327016" z3="2.22578893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50677237" y3="-2.54583361" z3="-0.13030913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35541827" y3="-3.71002881" z3="1.75125485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69693174" y3="-2.61988273" z3="4.09856283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86838028" y3="-0.22611304" z3="4.22833258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04334427" y3="0.93604773" z3="2.34722585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80028711" y3="0.44521869" z3="-4.29531019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77675069" y3="-0.52500709" z3="-4.47866242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42341634" y3="-1.71558423" z3="-5.10250764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13481188" y3="-1.94245456" z3="-5.57568828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83444961" y3="-0.96860103" z3="-5.37175545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04912935" y3="1.36706368" z3="-3.76416188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79709519" y3="-0.3820848" z3="-4.12167297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43168518" y3="-2.76751292" z3="-5.24496294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10052616" y3="-2.88195286" z3="-6.07649638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85791053" y3="-1.15119118" z3="-5.70379032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3793082" y3="-1.93204876" z3="5.04884635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3091558" y3="-3.75597539" z3="3.92169177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20118232" y3="-3.67136338" z3="-6.01993043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43823063" y3="-2.68235518" z3="-4.56983804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06210003" y3="1.17052907" z3="-1.4804772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10031761" y3="1.55962023" z3="-2.45776857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42815866" y3="1.51294315" z3="-1.67263211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83454792" y3="2.19162736" z3="-2.7952141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15533773" y3="1.2153007" z3="-0.91083028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88924274" y3="2.44575245" z3="-2.93458946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5569806" y3="2.24336437" z3="-3.61891953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88603539" y3="2.54998605" z3="-3.78296679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83503407" y3="2.51614483" z3="-4.39214696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21478423" y3="3.06933672" z3="-4.68736104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37985768" y3="3.14447079" z3="-3.30759987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26229449" y3="3.55541923" z3="-4.09235838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17769059" y3="4.15590488" z3="-2.70157927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9151042" y3="5.48897161" z3="-2.91056873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0075746" y3="3.86737134" z3="-2.05462208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5441137" y3="6.24500565" z3="-2.43198096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02586866" y3="4.94145475" z3="-4.30365957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83641496" y3="5.891715" z3="-3.7331952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17279079" y3="5.23832515" z3="-4.92163599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64284389" y3="6.95514379" z3="-3.898879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47229052" y3="-2.18251767" z3="-0.29720571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44749642" y3="-2.98043156" z3="-1.05895382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00127763" y3="-2.55602818" z3="0.59446376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0842038" y3="-1.36292127" z3="-0.71972027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16864217" y3="-1.42212643" z3="-1.1571149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30094172" y3="-0.38250017" z3="-1.51029464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09097163" y3="-1.55283601" z3="-0.95376026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41183027" y3="-2.08053126" z3="-2.00385445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3379,.0344,-.193;7.3817,.164,.4206;6.6416,.437,-.3378;4.7199,1.23,-2.2548;4.3846,.4173,-1.1842;2.7241,.8361,-3.66;3.6218,1.7409,-3.1239;1.3644,2.5798,-4.5983;1.5537,1.2377,-4.3697;.4836,2.9135,-5.1557;2.9301,-.4949,-3.4498;3.0971,.0174,-1.0059;2.4047,-1.1207,-2.0153;.9325,-.9937,-1.8443;3.108,-2.4452,-1.8677;-.1389,-3.6128,.6727;-.0306,-5.2759,-4.7382;-.2551,-5.0142,-3.7007;-.8435,-4.3109,-1.0822;.7732,-4.6062,-2.8531;-1.5703,-5.0976,-3.2386;-1.8651,-4.7409,-1.9251;.4911,-4.2694,-1.5276;1.8048,-4.529,-3.2027;-2.3724,-5.4111,-3.9106;-2.9007,-4.7753,-1.5787;-1.0292,-3.855,.2367;-2.1679,-3.6342,.882;-3.0578,-4.0953,.4512;-2.1614,-3.4921,2.3484;-2.2184,-3.2909,5.1452;-3.3591,-3.6834,3.0527;-.9917,-3.2074,3.0688;-1.017,-3.1082,4.457;-3.3872,-3.5843,4.441;-4.2766,-3.918,2.5055;-.0322,-3.0837,2.5637;-.0868,-2.9065,4.9947;-4.3286,-3.7412,4.977;-2.2387,-3.2198,6.2363;1.4162,-3.9042,-.6283;2.1756,-3.4083,-1.0865;.519,.2287,-4.7153;-3.0714,-1.7086,.0165;-2.8912,-.9502,1.1727;-1.8271,-.2999,1.4989;-.3467,.5626,1.1973;-.4152,1.4501,-.436;.9964,-.7007,1.3907;-.3307,1.7679,2.6314;-3.8643,-.9311,2.0724;-3.6315,-.3091,3.3261;-.188,.7505,-1.2589;.3692,2.2296,-.4389;-1.389,1.9453,-.5978;1.0172,-1.0611,2.4327;1.9727,-.2445,1.1557;.8704,-1.5447,.6932;-.3927,1.2381,3.5984;.609,2.3498,2.6264;-1.1684,2.4851,2.5724;-2.7711,-.7663,3.8408;-4.5467,-.4744,3.9099;-3.4555,.7716,3.1977;4.8423,-.7303,.9863;4.4092,-2.0543,.8399;3.758,-2.7044,1.8808;3.5575,-2.0181,3.0751;4.0443,-.7302,3.2778;4.6948,-.0933,2.2258;4.5068,-2.5458,-.1303;3.3554,-3.71,1.7513;2.6969,-2.6199,4.0986;3.8684,-.2261,4.2283;5.0433,.936,2.3472;-.8003,.4452,-4.2953;-1.7768,-.525,-4.4787;-1.4234,-1.7156,-5.1025;-.1348,-1.9425,-5.5757;.8344,-.9686,-5.3718;-1.0491,1.3671,-3.7642;-2.7971,-.3821,-4.1217;-2.4317,-2.7675,-5.245;.1005,-2.882,-6.0765;1.8579,-1.1512,-5.7038;2.3793,-1.932,5.0488;2.3092,-3.756,3.9217;-2.2012,-3.6714,-6.0199;-3.4382,-2.6824,-4.5698;7.0621,1.1705,-1.4805;6.1003,1.5596,-2.4578;8.4282,1.5129,-1.6726;8.8345,2.1916,-2.7952;9.1553,1.2153,-.9108;9.8892,2.4458,-2.9346;6.557,2.2434,-3.6189;7.886,2.55,-3.783;5.835,2.5161,-4.3921;8.2148,3.0693,-4.6874;3.3799,3.1445,-3.3076;2.2623,3.5554,-4.0924;4.1777,4.1559,-2.7016;3.9151,5.489,-2.9106;5.0076,3.8674,-2.0546;4.5441,6.245,-2.432;2.0259,4.9415,-4.3037;2.8364,5.8917,-3.7332;1.1728,5.2383,-4.9216;2.6428,6.9551,-3.8989;-4.4723,-2.1825,-.2972;-4.4475,-2.9804,-1.059;-5.0013,-2.556,.5945;-5.0842,-1.3629,-.7197;-2.1686,-1.4221,-1.1571;-2.3009,-.3825,-1.5103;-1.091,-1.5528,-.9538;-2.4118,-2.0805,-2.0039;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650403957099</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001855081675 0.000326692518 0.021960187689 0.005333859447</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030638557 -0.000626472 -0.000042173 0.000116832 0.000172790 0.000283205 0.000411862 0.000429077 0.000592013 0.000794047 0.000936198 0.001051165 0.001281389 0.001333076 0.001361634 0.001412466 0.001651991 0.001803095 0.001845652 0.001949803 0.002173689 0.002507548 0.002564001 0.002725452 0.002862638 0.003046024 0.003272310 0.003458566 0.003878095 0.003962920 0.004438385 0.004775733 0.004841438 0.005092212 0.005976105 0.006055282 0.006312716 0.006638906 0.006839216 0.007597137 0.008049936 0.008204119 0.009237989 0.009551767 0.009997693 0.010664695 0.011035531 0.011592451 0.011653238 0.012247538 0.012862491 0.013205258 0.014009974 0.014413537 0.015022317 0.015385671 0.015693307 0.016232409 0.016847265 0.017402247 0.017578223 0.018105443 0.019386634 0.019499983 0.019938949 0.020811426 0.021206522 0.021421872 0.022441382 0.023130910 0.025190864 0.025971771 0.026748312 0.026985832 0.027455763 0.029269390 0.029500189 0.031406095 0.033283670 0.033502346 0.033884868 0.035818647 0.036825937 0.037599841 0.039642393 0.039980686 0.040772774 0.042246758 0.044291323 0.044883536 0.045399616 0.046863737 0.047655999 0.049203422 0.050302204 0.050808505 0.051034091 0.051230466 0.052478528 0.052593901 0.052876184 0.053013759 0.054687387 0.054755817 0.055731269 0.056201063 0.056496082 0.056534268 0.057030142 0.058395412 0.060318680 0.060740039 0.061615740 0.062105984 0.063180495 0.064380773 0.065116373 0.065822796 0.066337449 0.067794896 0.068942505 0.070235011 0.072686001 0.074457248 0.074528946 0.076176768 0.077926644 0.083618915 0.085269755 0.086892055 0.087251282 0.088048662 0.090410030 0.090934916 0.092991050 0.094599261 0.095263764 0.096316110 0.097342616 0.097888345 0.098877827 0.099899248 0.100272738 0.102363500 0.102943058 0.103316553 0.103479198 0.103945565 0.105732371 0.106853556 0.107396223 0.109566851 0.110556241 0.111644145 0.112533347 0.113819935 0.114933595 0.116228133 0.116747780 0.119184090 0.120766595 0.121996232 0.123008765 0.124563986 0.125549153 0.126253807 0.126960674 0.131765995 0.134978587 0.135722021 0.142725895 0.143552548 0.146958145 0.147301610 0.149662248 0.152370124 0.154727911 0.156019465 0.156648372 0.161499535 0.161825283 0.173335349 0.173998851 0.179796250 0.184033432 0.185340029 0.189284917 0.190158099 0.193945143 0.194052470 0.198342300 0.200136186 0.205103565 0.206888991 0.207240158 0.210047169 0.213846771 0.216316888 0.217616887 0.218160792 0.220665348 0.225116852 0.226225411 0.232003176 0.235016844 0.235429386 0.235867842 0.244562285 0.255946402 0.257215212 0.263457263 0.269782341 0.280331693 0.282884996 0.286204007 0.291538807 0.296668841 0.304285093 0.305671067 0.307255199 0.313988700 0.316617220 0.317329395 0.321986833 0.329669700 0.332708052 0.351731417 0.352054989 0.354816368 0.355725956 0.359965578 0.362775915 0.363648269 0.384293100 0.386049059 0.391854665 0.410625824 0.425405665 0.430238978 0.461687579 0.468638597 0.477899049 0.483573575 0.483608545 0.487507110 0.491170447 0.509254116 0.515213762 0.535173401 0.566187158 0.573021586 0.592229805 0.593585929 0.606412233 0.607947742 0.644577634 0.646745775 0.648871066 0.674255407 0.677766493 0.685251706 0.691520062 0.693444843 0.699627762 0.704399969 0.717235558 0.741243719 0.751225638 0.758866219 0.768352172 0.772527674 0.778770526 0.810629539 0.813874124 0.818895898 0.821632074 0.823386880 0.831467945 0.833603418 0.835858642 0.841713234 0.845520960 0.846959849 0.848695585 0.858923156 0.865872384 0.865989419 0.873803552 0.883498457 0.884523976 0.889520586 0.894169570 0.900730181 0.903994085 0.922992267 0.923582421 0.933703944 0.935374920 0.965692872 0.975725628 0.985951566 1.001118234 1.018262533 1.027863442 1.041683097 1.050690960 1.057414448 1.068493470 1.086577380 1.088584910 1.104252734 1.106274765 1.112293996 1.122558806 1.124368981 1.135742124 1.143622087 1.174274263 1.178172402 1.181017854 1.186437405 1.191002949 1.196127440 1.224197023 1.228204171 1.274653072 1.301420566 1.319425378 1.328088831 1.332796598 1.335406322 1.335941699 1.341882136 1.343003050 1.344908757 1.358979524 1.378625478 1.382874889 1.384204793 1.415185365 1.419708373 1.435977991 1.551467618 1.681300712 1.775924709</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">211</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33724692" y3="0.03783518" z3="-0.19200127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38135345" y3="0.16597886" z3="0.42215507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64178383" y3="0.43856273" z3="-0.33703703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72161609" y3="1.22997721" z3="-2.2565588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38480996" y3="0.42070078" z3="-1.18403141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72529071" y3="0.83743306" z3="-3.66099105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6249727" y3="1.74137431" z3="-3.12733821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36961555" y3="2.58125014" z3="-4.60456983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55585646" y3="1.23964233" z3="-4.37210848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48931197" y3="2.91587179" z3="-5.16207941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.928002" y3="-0.49292746" z3="-3.44749721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09661911" y3="0.02397197" z3="-1.00497153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40370451" y3="-1.11585242" z3="-2.01172806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93166526" y3="-0.98896723" z3="-1.840078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10774262" y3="-2.43987162" z3="-1.86258706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14042307" y3="-3.61014426" z3="0.67082852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02729646" y3="-5.26934186" z3="-4.74027739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25301834" y3="-5.00828506" z3="-3.70279614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84330569" y3="-4.30897763" z3="-1.08400044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77417127" y3="-4.59979528" z3="-2.85434577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56795003" y3="-5.09388288" z3="-3.24164645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86385971" y3="-4.73893355" z3="-1.92789431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49113417" y3="-4.26509595" z3="-1.52860247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8071641" y3="-4.52426693" z3="-3.20394427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36848697" y3="-5.40829936" z3="-3.91430039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89989071" y3="-4.77352551" z3="-1.58199847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02948023" y3="-3.85534488" z3="0.23566027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1682758" y3="-3.63758518" z3="0.88166701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05757332" y3="-4.09936586" z3="0.45032868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16217045" y3="-3.49727663" z3="2.34811902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21896" y3="-3.30238377" z3="5.14536491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35958161" y3="-3.69232212" z3="3.05222177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99304011" y3="-3.21133603" z3="3.06884045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01918257" y3="-3.11399399" z3="4.45700902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38679795" y3="-3.59743401" z3="4.44080902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.275987" y3="-3.92871948" z3="2.50491803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03116569" y3="-3.08898179" z3="2.56378922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08790758" y3="-2.91330997" z3="4.99521584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32439842" y3="-3.7631153" z3="4.9763224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23817519" y3="-3.23509163" z3="6.23675351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41442491" y3="-3.90008305" z3="-0.62806224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17568996" y3="-3.4039295" z3="-1.08501643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51952151" y3="0.23247902" z3="-4.71463901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07416771" y3="-1.71170749" z3="0.01965753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89486052" y3="-0.95521246" z3="1.17686941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83243134" y3="-0.30337464" z3="1.50406343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35302781" y3="0.56128321" z3="1.20211697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42369095" y3="1.44974213" z3="-0.43061983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99232445" y3="-0.69992397" z3="1.39245327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33627469" y3="1.76522693" z3="2.63739474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86740298" y3="-0.93961284" z3="2.07726725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63375872" y3="-0.32071541" z3="3.33261865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19249332" y3="0.75224881" z3="-1.25334885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35898241" y3="2.23153424" z3="-0.43258137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.3986041" y3="1.94256959" z3="-0.59340575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01521529" y3="-1.06020904" z3="2.4343593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96839961" y3="-0.24303619" z3="1.15565746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86622854" y3="-1.54429448" z3="0.69547612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39625527" y3="1.2347807" z3="3.6041286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.6030356" y3="2.34787302" z3="2.63143574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17448046" y3="2.48254796" z3="2.58060956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.771688" y3="-0.77699259" z3="3.84496823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54753419" y3="-0.48946424" z3="3.91789296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4604768" y3="0.76039894" z3="3.20707644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8403128" y3="-0.72458262" z3="0.98808658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40931221" y3="-2.04941052" z3="0.84388593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75771941" y3="-2.69853515" z3="1.88513719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55443763" y3="-2.01012683" z3="3.07730276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0392756" y3="-0.72107202" z3="3.27839394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69019668" y3="-0.08524395" z3="2.22595426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51061043" y3="-2.54321374" z3="-0.12360944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35754314" y3="-3.70510533" z3="1.75761408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69412291" y3="-2.61166425" z3="4.10113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86260156" y3="-0.21564067" z3="4.22871222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03751467" y3="0.94474864" z3="2.34608911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79962266" y3="0.45003565" z3="-4.29467638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77709667" y3="-0.51918829" z3="-4.47504947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42503679" y3="-1.71026029" z3="-5.09960165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13666797" y3="-1.93822662" z3="-5.57382221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83368437" y3="-0.96560767" z3="-5.37086972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04828058" y3="1.37268118" z3="-3.7632665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79718609" y3="-0.3751023" z3="-4.11811538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43484575" y3="-2.76153998" z3="-5.24303417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09663771" y3="-2.87793064" z3="-6.07436637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85663844" y3="-1.14948615" z3="-5.70311506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37407341" y3="-1.92231385" z3="5.05019705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30996427" y3="-3.74933697" z3="3.92669311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20654087" y3="-3.66489851" z3="-6.01841417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44060868" y3="-2.67567771" z3="-4.56672266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06390744" y3="1.16918968" z3="-1.48105536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10280515" y3="1.55663291" z3="-2.45979689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43092122" y3="1.51019799" z3="-1.67326679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83889053" y3="2.18581818" z3="-2.79725202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1573305" y3="1.21277196" z3="-0.91066976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89377147" y3="2.43647917" z3="-2.93717441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56107187" y3="2.2364885" z3="-3.62256608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89118434" y3="2.54251765" z3="-3.78644152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83964351" y3="2.5078473" z3="-4.3968355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2211548" y3="3.05934486" z3="-4.69212886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38608428" y3="3.1453476" z3="-3.31474924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26944822" y3="3.55679083" z3="-4.10061457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18629226" y3="4.15706449" z3="-2.71210954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92747252" y3="5.48998995" z3="-2.92631452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.015698" y3="3.86861681" z3="-2.06440175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55861217" y3="6.24613953" z3="-2.45065623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03584075" y3="4.94342574" z3="-4.31574577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84968197" y3="5.8929556" z3="-3.75004362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18349451" y3="5.24026852" z3="-4.93477287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65904427" y3="6.95642073" z3="-3.91973211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47406267" y3="-2.18724197" z3="-0.29451187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44778619" y3="-2.98387844" z3="-1.05722632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00266174" y3="-2.56340994" z3="0.59598228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08680532" y3="-1.36778997" z3="-0.71580793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17219418" y3="-1.42230621" z3="-1.15373207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30842307" y3="-0.3830804" z3="-1.50513944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0970111" y3="-1.5463455" z3="-0.94989309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41731052" y3="-2.07918986" z3="-2.00290787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3372,.0378,-.192;7.3814,.166,.4222;6.6418,.4386,-.337;4.7216,1.23,-2.2566;4.3848,.4207,-1.184;2.7253,.8374,-3.661;3.625,1.7414,-3.1273;1.3696,2.5813,-4.6046;1.5559,1.2396,-4.3721;.4893,2.9159,-5.1621;2.928,-.4929,-3.4475;3.0966,.024,-1.005;2.4037,-1.1159,-2.0117;.9317,-.989,-1.8401;3.1077,-2.4399,-1.8626;-.1404,-3.6101,.6708;-.0273,-5.2693,-4.7403;-.253,-5.0083,-3.7028;-.8433,-4.309,-1.084;.7742,-4.5998,-2.8543;-1.568,-5.0939,-3.2416;-1.8639,-4.7389,-1.9279;.4911,-4.2651,-1.5286;1.8072,-4.5243,-3.2039;-2.3685,-5.4083,-3.9143;-2.8999,-4.7735,-1.582;-1.0295,-3.8553,.2357;-2.1683,-3.6376,.8817;-3.0576,-4.0994,.4503;-2.1622,-3.4973,2.3481;-2.219,-3.3024,5.1454;-3.3596,-3.6923,3.0522;-.993,-3.2113,3.0688;-1.0192,-3.114,4.457;-3.3868,-3.5974,4.4408;-4.276,-3.9287,2.5049;-.0312,-3.089,2.5638;-.0879,-2.9133,4.9952;-4.3244,-3.7631,4.9763;-2.2382,-3.2351,6.2368;1.4144,-3.9001,-.6281;2.1757,-3.4039,-1.085;.5195,.2325,-4.7146;-3.0742,-1.7117,.0197;-2.8949,-.9552,1.1769;-1.8324,-.3034,1.5041;-.353,.5613,1.2021;-.4237,1.4497,-.4306;.9923,-.6999,1.3925;-.3363,1.7652,2.6374;-3.8674,-.9396,2.0773;-3.6338,-.3207,3.3326;-.1925,.7522,-1.2533;.359,2.2315,-.4326;-1.3986,1.9426,-.5934;1.0152,-1.0602,2.4344;1.9684,-.243,1.1557;.8662,-1.5443,.6955;-.3963,1.2348,3.6041;.603,2.3479,2.6314;-1.1745,2.4825,2.5806;-2.7717,-.777,3.845;-4.5475,-.4895,3.9179;-3.4605,.7604,3.2071;4.8403,-.7246,.9881;4.4093,-2.0494,.8439;3.7577,-2.6985,1.8851;3.5544,-2.0101,3.0773;4.0393,-.7211,3.2784;4.6902,-.0852,2.226;4.5106,-2.5432,-.1236;3.3575,-3.7051,1.7576;2.6941,-2.6117,4.1011;3.8626,-.2156,4.2287;5.0375,.9447,2.3461;-.7996,.45,-4.2947;-1.7771,-.5192,-4.475;-1.425,-1.7103,-5.0996;-.1367,-1.9382,-5.5738;.8337,-.9656,-5.3709;-1.0483,1.3727,-3.7633;-2.7972,-.3751,-4.1181;-2.4348,-2.7615,-5.243;.0966,-2.8779,-6.0744;1.8566,-1.1495,-5.7031;2.3741,-1.9223,5.0502;2.31,-3.7493,3.9267;-2.2065,-3.6649,-6.0184;-3.4406,-2.6757,-4.5667;7.0639,1.1692,-1.4811;6.1028,1.5566,-2.4598;8.4309,1.5102,-1.6733;8.8389,2.1858,-2.7973;9.1573,1.2128,-.9107;9.8938,2.4365,-2.9372;6.5611,2.2365,-3.6226;7.8912,2.5425,-3.7864;5.8396,2.5078,-4.3968;8.2212,3.0593,-4.6921;3.3861,3.1453,-3.3147;2.2694,3.5568,-4.1006;4.1863,4.1571,-2.7121;3.9275,5.49,-2.9263;5.0157,3.8686,-2.0644;4.5586,6.2461,-2.4507;2.0358,4.9434,-4.3157;2.8497,5.893,-3.75;1.1835,5.2403,-4.9348;2.659,6.9564,-3.9197;-4.4741,-2.1872,-.2945;-4.4478,-2.9839,-1.0572;-5.0027,-2.5634,.596;-5.0868,-1.3678,-.7158;-2.1722,-1.4223,-1.1537;-2.3084,-.3831,-1.5051;-1.097,-1.5463,-.9499;-2.4173,-2.0792,-2.0029;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411003633</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002040440630 0.000315298485 0.019780758402 0.005337763447</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030642206 -0.000611633 -0.000045557 0.000118769 0.000178349 0.000283552 0.000412012 0.000429606 0.000591901 0.000793618 0.000936467 0.001051652 0.001281156 0.001333942 0.001362632 0.001412779 0.001652980 0.001805639 0.001846602 0.001949861 0.002176894 0.002507602 0.002566598 0.002725649 0.002863776 0.003046296 0.003273701 0.003462787 0.003878505 0.003962874 0.004438423 0.004777095 0.004844627 0.005093177 0.005990862 0.006061850 0.006313114 0.006645307 0.006841025 0.007608039 0.008054625 0.008206456 0.009238306 0.009552418 0.009998187 0.010665225 0.011040219 0.011592666 0.011656958 0.012272095 0.012862479 0.013213782 0.014010821 0.014417139 0.015022735 0.015391592 0.015694105 0.016232553 0.016847520 0.017428489 0.017630662 0.018108489 0.019389734 0.019505461 0.019945680 0.020812197 0.021209065 0.021422027 0.022443292 0.023131350 0.025200588 0.025973837 0.026751779 0.026985962 0.027456000 0.029269507 0.029505635 0.031407455 0.033284728 0.033502596 0.033888905 0.035822837 0.036831394 0.037603629 0.039642501 0.039980566 0.040773645 0.042257020 0.044297535 0.044963566 0.045419788 0.046878473 0.047656712 0.049204697 0.050315899 0.050809134 0.051034601 0.051233131 0.052478540 0.052594498 0.052876301 0.053030619 0.054690152 0.054778106 0.055780064 0.056202737 0.056496409 0.056547148 0.057033471 0.058400227 0.060323177 0.060759153 0.061616569 0.062111915 0.063186769 0.064384568 0.065120425 0.065822997 0.066338506 0.067803505 0.068950909 0.070238767 0.072688803 0.074457683 0.074528977 0.076177691 0.077939670 0.083620012 0.085296532 0.086897730 0.087255245 0.088048761 0.090410219 0.090936815 0.092992806 0.094599581 0.095273353 0.096318335 0.097348712 0.097889070 0.098884574 0.099903490 0.100276505 0.102365011 0.102956430 0.103327247 0.103480755 0.103948946 0.105743760 0.106855297 0.107397448 0.109566980 0.110559931 0.111670973 0.112534120 0.114035197 0.114933923 0.116250255 0.116846155 0.119238449 0.120772796 0.122011200 0.123014933 0.124566580 0.125550230 0.126255442 0.126961548 0.131770875 0.134994838 0.135723878 0.142727407 0.143552858 0.146960177 0.147302065 0.149668447 0.152380009 0.154728000 0.156026684 0.156649453 0.161510770 0.161828417 0.173336763 0.173998955 0.179802798 0.184051601 0.185340042 0.189307431 0.190158364 0.193952671 0.194074063 0.198342279 0.200139195 0.205105362 0.206891008 0.207240955 0.210048613 0.213859854 0.216317023 0.217624146 0.218174555 0.220670834 0.225145860 0.226225623 0.232012776 0.235018722 0.235429537 0.235881337 0.244562303 0.255947465 0.257226085 0.263457246 0.269785058 0.280334370 0.282886406 0.286204421 0.291543729 0.296670763 0.304306449 0.305684712 0.307258215 0.313996471 0.316632169 0.317329478 0.321986825 0.329670064 0.332731665 0.351731469 0.352055328 0.354816505 0.355739815 0.359972253 0.362776032 0.363665369 0.384295578 0.386049181 0.391858108 0.410638725 0.425418360 0.430247775 0.461771841 0.468640052 0.477967928 0.483584441 0.483767255 0.487523197 0.491197735 0.509254798 0.515213989 0.535177624 0.566193217 0.573075082 0.592230450 0.593598595 0.606412586 0.607948680 0.644581080 0.646748694 0.648871569 0.674256299 0.677768969 0.685289384 0.691520280 0.693459392 0.699634413 0.704400166 0.717248776 0.741244759 0.751227859 0.758876592 0.768450723 0.772536288 0.778772705 0.810636876 0.813979484 0.818903112 0.821632297 0.823386997 0.831472736 0.833632825 0.835859078 0.841734269 0.845528973 0.846995702 0.848713240 0.858923508 0.865881694 0.866088838 0.873815965 0.883504275 0.884525539 0.889526886 0.894519386 0.900749731 0.904005826 0.923058755 0.923600449 0.933728864 0.935428252 0.965747929 0.975744222 0.985955329 1.001120326 1.018263652 1.027865093 1.041683846 1.050710809 1.057417725 1.068502262 1.086582568 1.088586661 1.104260793 1.106287976 1.112296867 1.122623290 1.124376705 1.135743911 1.143628484 1.174282594 1.178347890 1.181026023 1.186438788 1.191128343 1.196131675 1.224233882 1.228229859 1.274662290 1.301421907 1.319427046 1.328094424 1.332812508 1.335417381 1.335953363 1.341898002 1.343003765 1.344910507 1.358993006 1.378646422 1.382879506 1.384229027 1.415185449 1.419726019 1.436035764 1.551467691 1.681329092 1.775966902</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">212</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33812255" y3="0.04274008" z3="-0.19102999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38254662" y3="0.1669662" z3="0.42150292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64320969" y3="0.43998777" z3="-0.33766665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72380754" y3="1.23218216" z3="-2.25749379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38588606" y3="0.42529957" z3="-1.18329028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72627128" y3="0.83902251" z3="-3.66029787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62746362" y3="1.74309421" z3="-3.12896791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37258209" y3="2.58313385" z3="-4.60694094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55709862" y3="1.2416053" z3="-4.37140355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49264765" y3="2.91737819" z3="-5.16540899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92763864" y3="-0.49161172" z3="-3.44487225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09702637" y3="0.02997728" z3="-1.00318209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40311257" y3="-1.11144101" z3="-2.00757826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93112853" y3="-0.98375264" z3="-1.8354628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10670337" y3="-2.43545132" z3="-1.85644258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14018784" y3="-3.61228777" z3="0.67133738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02202352" y3="-5.26326684" z3="-4.7421588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24862007" y3="-5.00369016" z3="-3.70455764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8422854" y3="-4.30644322" z3="-1.0857601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77812603" y3="-4.59722418" z3="-2.8541364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56463107" y3="-5.08841177" z3="-3.24519642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86223309" y3="-4.73448999" z3="-1.93159537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49324452" y3="-4.26353272" z3="-1.52849909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81040649" y3="-4.51906871" z3="-3.20168315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36575143" y3="-5.40039978" z3="-3.91934001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89836346" y3="-4.76970488" z3="-1.58737354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02990927" y3="-3.85450931" z3="0.23410081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16938521" y3="-3.63942063" z3="0.87981857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05776755" y3="-4.10180657" z3="0.4473427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16316963" y3="-3.50322108" z3="2.34680985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21918817" y3="-3.31785772" z3="5.14481281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.359893" y3="-3.70288122" z3="3.0505883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99434067" y3="-3.21705506" z3="3.06819533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0193535" y3="-3.12552662" z3="4.45694646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38733441" y3="-3.61185025" z3="4.43940626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2762908" y3="-3.9387757" z3="2.50254836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03574465" y3="-3.08583685" z3="2.56345659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08956881" y3="-2.92264058" z3="4.9953676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32720338" y3="-3.77663923" z3="4.97497033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23875207" y3="-3.253607" z3="6.23632047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4160103" y3="-3.90022959" z3="-0.6262877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17547892" y3="-3.40072479" z3="-1.08115938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51969815" y3="0.23430821" z3="-4.71287106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07821238" y3="-1.71342077" z3="0.02098073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89835883" y3="-0.95950724" z3="1.18013629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83582523" y3="-0.30751769" z3="1.50755681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35781754" y3="0.56006177" z3="1.20718532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42959432" y3="1.4518441" z3="-0.42364699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98941005" y3="-0.69974914" z3="1.39585038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34412025" y3="1.76118462" z3="2.64447123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86997013" y3="-0.9472513" z3="2.08162291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63653118" y3="-0.33125368" z3="3.33813762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19851062" y3="0.75567668" z3="-1.24843512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3510934" y3="2.23484079" z3="-0.42348942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40532588" y3="1.94354048" z3="-0.5850176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01300305" y3="-1.06164324" z3="2.43735722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96422285" y3="-0.24043544" z3="1.15971673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86452538" y3="-1.54298511" z3="0.6973757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40554473" y3="1.22862304" z3="3.61025534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59441956" y3="2.3447334" z3="2.64127657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18296219" y3="2.4775" z3="2.58716322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77425454" y3="-0.78893187" z3="3.84907802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5502576" y3="-0.50180111" z3="3.92276322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46302695" y3="0.75046047" z3="3.21516557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84037409" y3="-0.71796964" z3="0.98999645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41141438" y3="-2.04374911" z3="0.84770413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75955564" y3="-2.69176535" z3="1.88959178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55403719" y3="-2.00127348" z3="3.08054894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03593731" y3="-0.71093614" z3="3.27925767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68732274" y3="-0.07628763" z3="2.22632949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51304916" y3="-2.5388098" z3="-0.12004724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36063201" y3="-3.69914907" z3="1.76330978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69302771" y3="-2.60196304" z3="4.1043194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85611752" y3="-0.20343716" z3="4.22745111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03232073" y3="0.9545611" z3="2.34434876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79850986" y3="0.4536567" z3="-4.29101089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77718171" y3="-0.51491363" z3="-4.47304102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42690489" y3="-1.70619256" z3="-5.0972335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13918579" y3="-1.93603807" z3="-5.57128209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83227404" y3="-0.96424884" z3="-5.36889223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04515215" y3="1.37650485" z3="-3.76022193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79683974" y3="-0.36965054" z3="-4.11529283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43772943" y3="-2.75576013" z3="-5.23982847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09332807" y3="-2.87615643" z3="-6.07176839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85498997" y3="-1.14922876" z3="-5.70160356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36759169" y3="-1.91013079" z3="5.04951699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31304897" y3="-3.74162473" z3="3.93284012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21056025" y3="-3.65840922" z3="-6.01704701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44311351" y3="-2.67001663" z3="-4.56264968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06611638" y3="1.16744564" z3="-1.48332174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1055198" y3="1.55551907" z3="-2.46219168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43347054" y3="1.50428753" z3="-1.67711402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84226336" y3="2.17625961" z3="-2.80287271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15975123" y3="1.20798701" z3="-0.9138812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89792702" y3="2.42625688" z3="-2.94339031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56474004" y3="2.23202609" z3="-3.62666559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89496302" y3="2.5331034" z3="-3.79232012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84378288" y3="2.50382007" z3="-4.40111941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22560049" y3="3.04758541" z3="-4.69914417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39125037" y3="3.14667053" z3="-3.3207441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27507543" y3="3.55780413" z3="-4.10743507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19426396" y3="4.15842213" z3="-2.72210563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93863771" y3="5.49130781" z3="-2.94085416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02305418" y3="3.87033083" z3="-2.07357195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5720005" y3="6.24755445" z3="-2.4683389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04542403" y3="4.94358774" z3="-4.328295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86159788" y3="5.89369946" z3="-3.76579149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19350865" y3="5.24038951" z3="-4.94789701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67371485" y3="6.9569567" z3="-3.93951287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47821942" y3="-2.19003279" z3="-0.29257348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45230009" y3="-2.9850719" z3="-1.05739532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0050304" y3="-2.56852845" z3="0.59834146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09281634" y3="-1.37050818" z3="-0.71115645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17781421" y3="-1.42031656" z3="-1.15258181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31198644" y3="-0.37921223" z3="-1.50114619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09954657" y3="-1.55059761" z3="-0.95117422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42070398" y3="-2.07539686" z3="-2.00145372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3381,.0427,-.191;7.3825,.167,.4215;6.6432,.44,-.3377;4.7238,1.2322,-2.2575;4.3859,.4253,-1.1833;2.7263,.839,-3.6603;3.6275,1.7431,-3.129;1.3726,2.5831,-4.6069;1.5571,1.2416,-4.3714;.4926,2.9174,-5.1654;2.9276,-.4916,-3.4449;3.097,.03,-1.0032;2.4031,-1.1114,-2.0076;.9311,-.9838,-1.8355;3.1067,-2.4355,-1.8564;-.1402,-3.6123,.6713;-.022,-5.2633,-4.7422;-.2486,-5.0037,-3.7046;-.8423,-4.3064,-1.0858;.7781,-4.5972,-2.8541;-1.5646,-5.0884,-3.2452;-1.8622,-4.7345,-1.9316;.4932,-4.2635,-1.5285;1.8104,-4.5191,-3.2017;-2.3658,-5.4004,-3.9193;-2.8984,-4.7697,-1.5874;-1.0299,-3.8545,.2341;-2.1694,-3.6394,.8798;-3.0578,-4.1018,.4473;-2.1632,-3.5032,2.3468;-2.2192,-3.3179,5.1448;-3.3599,-3.7029,3.0506;-.9943,-3.2171,3.0682;-1.0194,-3.1255,4.4569;-3.3873,-3.6119,4.4394;-4.2763,-3.9388,2.5025;-.0357,-3.0858,2.5635;-.0896,-2.9226,4.9954;-4.3272,-3.7766,4.975;-2.2388,-3.2536,6.2363;1.416,-3.9002,-.6263;2.1755,-3.4007,-1.0812;.5197,.2343,-4.7129;-3.0782,-1.7134,.021;-2.8984,-.9595,1.1801;-1.8358,-.3075,1.5076;-.3578,.5601,1.2072;-.4296,1.4518,-.4236;.9894,-.6997,1.3959;-.3441,1.7612,2.6445;-3.87,-.9473,2.0816;-3.6365,-.3313,3.3381;-.1985,.7557,-1.2484;.3511,2.2348,-.4235;-1.4053,1.9435,-.585;1.013,-1.0616,2.4374;1.9642,-.2404,1.1597;.8645,-1.543,.6974;-.4055,1.2286,3.6103;.5944,2.3447,2.6413;-1.183,2.4775,2.5872;-2.7743,-.7889,3.8491;-4.5503,-.5018,3.9228;-3.463,.7505,3.2152;4.8404,-.718,.99;4.4114,-2.0437,.8477;3.7596,-2.6918,1.8896;3.554,-2.0013,3.0805;4.0359,-.7109,3.2793;4.6873,-.0763,2.2263;4.513,-2.5388,-.12;3.3606,-3.6991,1.7633;2.693,-2.602,4.1043;3.8561,-.2034,4.2275;5.0323,.9546,2.3443;-.7985,.4537,-4.291;-1.7772,-.5149,-4.473;-1.4269,-1.7062,-5.0972;-.1392,-1.936,-5.5713;.8323,-.9642,-5.3689;-1.0452,1.3765,-3.7602;-2.7968,-.3697,-4.1153;-2.4377,-2.7558,-5.2398;.0933,-2.8762,-6.0718;1.855,-1.1492,-5.7016;2.3676,-1.9101,5.0495;2.313,-3.7416,3.9328;-2.2106,-3.6584,-6.017;-3.4431,-2.67,-4.5626;7.0661,1.1674,-1.4833;6.1055,1.5555,-2.4622;8.4335,1.5043,-1.6771;8.8423,2.1763,-2.8029;9.1598,1.208,-.9139;9.8979,2.4263,-2.9434;6.5647,2.232,-3.6267;7.895,2.5331,-3.7923;5.8438,2.5038,-4.4011;8.2256,3.0476,-4.6991;3.3913,3.1467,-3.3207;2.2751,3.5578,-4.1074;4.1943,4.1584,-2.7221;3.9386,5.4913,-2.9409;5.0231,3.8703,-2.0736;4.572,6.2476,-2.4683;2.0454,4.9436,-4.3283;2.8616,5.8937,-3.7658;1.1935,5.2404,-4.9479;2.6737,6.957,-3.9395;-4.4782,-2.19,-.2926;-4.4523,-2.9851,-1.0574;-5.005,-2.5685,.5983;-5.0928,-1.3705,-.7112;-2.1778,-1.4203,-1.1526;-2.312,-.3792,-1.5011;-1.0995,-1.5506,-.9512;-2.4207,-2.0754,-2.0015;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416348988</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002277221479 0.000313159565 0.018149627814 0.005338346865</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030642299 -0.000562737 -0.000005976 0.000030678 0.000182695 0.000271517 0.000412657 0.000429339 0.000592816 0.000792847 0.000933730 0.001054168 0.001282257 0.001333876 0.001363486 0.001414392 0.001654246 0.001807035 0.001847707 0.001951374 0.002178116 0.002501238 0.002571890 0.002722190 0.002863413 0.003031330 0.003266369 0.003464147 0.003866354 0.003961769 0.004437437 0.004770799 0.004834149 0.005092567 0.005999347 0.006063150 0.006313244 0.006645665 0.006845412 0.007627792 0.008064311 0.008206327 0.009237056 0.009553866 0.010000107 0.010666440 0.011038353 0.011585080 0.011648938 0.012295996 0.012857817 0.013225301 0.014010314 0.014422198 0.015023164 0.015393737 0.015691549 0.016233575 0.016845842 0.017445091 0.017660590 0.018109288 0.019394084 0.019513434 0.019959203 0.020812951 0.021207767 0.021422641 0.022442128 0.023130582 0.025210879 0.025970543 0.026757288 0.026984225 0.027456578 0.029270376 0.029507558 0.031407587 0.033285185 0.033502632 0.033893995 0.035806436 0.036838124 0.037606701 0.039642630 0.039980823 0.040774880 0.042265903 0.044299841 0.045001781 0.045435645 0.046891993 0.047658742 0.049205471 0.050340965 0.050809462 0.051034178 0.051237940 0.052478580 0.052594349 0.052876383 0.053038487 0.054691805 0.054797547 0.055812151 0.056205672 0.056496454 0.056560787 0.057034884 0.058400061 0.060325858 0.060774124 0.061617139 0.062113030 0.063191419 0.064389896 0.065121943 0.065821847 0.066336402 0.067812516 0.068951534 0.070239305 0.072690308 0.074451150 0.074529359 0.076178311 0.077958425 0.083619603 0.085318717 0.086907092 0.087259405 0.088048013 0.090410038 0.090938498 0.092992573 0.094599846 0.095273046 0.096325482 0.097354971 0.097889064 0.098887155 0.099909474 0.100281621 0.102368366 0.102967700 0.103343795 0.103481130 0.103966099 0.105749457 0.106858994 0.107393897 0.109569291 0.110568714 0.111709637 0.112534863 0.114276717 0.114939253 0.116270147 0.117010015 0.119292554 0.120782652 0.122043490 0.123017064 0.124577301 0.125551773 0.126255298 0.126959751 0.131775956 0.135013731 0.135729188 0.142729553 0.143553145 0.146961374 0.147301698 0.149667911 0.152383173 0.154727164 0.156036701 0.156653157 0.161509583 0.161833966 0.173341318 0.174002494 0.179805735 0.184069500 0.185337623 0.189338420 0.190158064 0.193954850 0.194087568 0.198341988 0.200138380 0.205109101 0.206892496 0.207239422 0.210053320 0.213886009 0.216317920 0.217624865 0.218201840 0.220674097 0.225165532 0.226225071 0.232019217 0.235016892 0.235430449 0.235886530 0.244562505 0.255947630 0.257230110 0.263459642 0.269788756 0.280336088 0.282887092 0.286204212 0.291544348 0.296672036 0.304311178 0.305696701 0.307254948 0.313996998 0.316636748 0.317329679 0.321987098 0.329675714 0.332745797 0.351721243 0.352058110 0.354817766 0.355748081 0.359968329 0.362775968 0.363692534 0.384291276 0.386050060 0.391858853 0.410647863 0.425424360 0.430269146 0.461801279 0.468640613 0.478016028 0.483582768 0.483844578 0.487531316 0.491216537 0.509256162 0.515214079 0.535178330 0.566206261 0.573115004 0.592231464 0.593608282 0.606412732 0.607946501 0.644590935 0.646752830 0.648872995 0.674263131 0.677770582 0.685321261 0.691520264 0.693453542 0.699653614 0.704400031 0.717259212 0.741244585 0.751228617 0.758886046 0.768551342 0.772544980 0.778774215 0.810668975 0.814088222 0.818908371 0.821632267 0.823387697 0.831479936 0.833655397 0.835859420 0.841786256 0.845544419 0.847056572 0.848732076 0.858924012 0.865882967 0.866187818 0.873827962 0.883505265 0.884530732 0.889532865 0.894947371 0.900772030 0.904012174 0.923165271 0.923662376 0.933772189 0.935477895 0.965791663 0.975770733 0.985968240 1.001122046 1.018265760 1.027872811 1.041684797 1.050721448 1.057418614 1.068501090 1.086583667 1.088591775 1.104267314 1.106297615 1.112299673 1.122712744 1.124388106 1.135748321 1.143631495 1.174287907 1.178410467 1.181026018 1.186439611 1.191179282 1.196135979 1.224264740 1.228236220 1.274662827 1.301421471 1.319426053 1.328099187 1.332828052 1.335419482 1.335954500 1.341917631 1.343004593 1.344910274 1.358991914 1.378651311 1.382890316 1.384239198 1.415211612 1.419749014 1.436147560 1.551468761 1.681330931 1.775978737</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">213</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33865064" y3="0.04649534" z3="-0.19029328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38408128" y3="0.1674139" z3="0.42061151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6446941" y3="0.44072034" z3="-0.33847559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72558007" y3="1.23344036" z3="-2.25856123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38664771" y3="0.42962999" z3="-1.18248501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72720105" y3="0.8412164" z3="-3.65981597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63026624" y3="1.74468699" z3="-3.13101498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37718949" y3="2.58471676" z3="-4.61184127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55895024" y3="1.24386155" z3="-4.37243684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49790352" y3="2.91913369" z3="-5.17113866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92584953" y3="-0.48895366" z3="-3.4412942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09727205" y3="0.03742263" z3="-1.00093357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40244435" y3="-1.10583751" z3="-2.0025308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93057911" y3="-0.97789233" z3="-1.82980327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10651684" y3="-2.42947516" z3="-1.8499129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14170396" y3="-3.6107826" z3="0.66976237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01639427" y3="-5.25802312" z3="-4.74399816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24464897" y3="-4.99885625" z3="-3.70658329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84123935" y3="-4.30519308" z3="-1.08791178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78051705" y3="-4.59186187" z3="-2.85492617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5607604" y3="-5.0853866" z3="-3.2488387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85990327" y3="-4.73303295" z3="-1.93514163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49430033" y3="-4.26001306" z3="-1.52914806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81428054" y3="-4.51546176" z3="-3.20182592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35951236" y3="-5.39884635" z3="-3.92389252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89694422" y3="-4.76780345" z3="-1.59190536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02995353" y3="-3.85570674" z3="0.23265228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16976264" y3="-3.64347806" z3="0.8786552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05759435" y3="-4.10615163" z3="0.44507503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16425401" y3="-3.50928131" z3="2.34573478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2224646" y3="-3.32659786" z3="5.1436493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36067979" y3="-3.71289944" z3="3.04901921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99652356" y3="-3.22089049" z3="3.06759847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02310206" y3="-3.13003667" z3="4.45615351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38874429" y3="-3.62388077" z3="4.43792518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27604021" y3="-3.95098083" z3="2.50069283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03539136" y3="-3.09091015" z3="2.56305013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09305548" y3="-2.92673661" z3="4.99503812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32645159" y3="-3.79478886" z3="4.97283771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24248224" y3="-3.26396145" z3="6.23521542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41517858" y3="-3.89699163" z3="-0.62537717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17625342" y3="-3.39667981" z3="-1.07866307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52020797" y3="0.23766059" z3="-4.71161627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08028659" y3="-1.71678517" z3="0.02328457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90129465" y3="-0.96511249" z3="1.18364641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83900219" y3="-0.31376869" z3="1.51302143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36411357" y3="0.55824642" z3="1.21343333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43910222" y3="1.45185305" z3="-0.41623539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98630904" y3="-0.6982882" z3="1.39822337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35170647" y3="1.75703226" z3="2.65316309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87338569" y3="-0.95479325" z3="2.08455225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63981447" y3="-0.34190194" z3="3.34285907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20409797" y3="0.75826921" z3="-1.24126538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34045955" y3="2.23731095" z3="-0.41509724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41622972" y3="1.94030694" z3="-0.5776592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01231024" y3="-1.06100515" z3="2.43913617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96018561" y3="-0.23708068" z3="1.1612209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86209945" y3="-1.54121705" z3="0.69911958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41050816" y3="1.22245719" z3="3.61760373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58597203" y3="2.34230405" z3="2.65013407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19203661" y3="2.47169357" z3="2.59876631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77674429" y3="-0.79989034" z3="3.85225148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55306989" y3="-0.51494055" z3="3.92761069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46807172" y3="0.74020609" z3="3.22280046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84003803" y3="-0.71166865" z3="0.99194472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41340856" y3="-2.03831762" z3="0.85205001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7614622" y3="-2.68520132" z3="1.89457417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.552824" y3="-1.99245689" z3="3.08338141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0324654" y3="-0.70087676" z3="3.28007167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68441183" y3="-0.06749514" z3="2.22672078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.518247" y3="-2.53550237" z3="-0.11355531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36495234" y3="-3.69361887" z3="1.77035609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69145406" y3="-2.59257717" z3="4.10717395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85098626" y3="-0.19174137" z3="4.22735658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02842379" y3="0.96401187" z3="2.34354216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79775255" y3="0.45795909" z3="-4.28968136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7772788" y3="-0.50927184" z3="-4.46864782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42859005" y3="-1.70096069" z3="-5.09376706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14128486" y3="-1.93187968" z3="-5.56941532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83132981" y3="-0.96139791" z3="-5.36718816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04342639" y3="1.38132263" z3="-3.75850363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79672259" y3="-0.36320302" z3="-4.11035464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44089488" y3="-2.74955401" z3="-5.23723163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08964007" y3="-2.87209314" z3="-6.07059936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85373162" y3="-1.14732228" z3="-5.70022516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36111124" y3="-1.89858371" z3="5.04892958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31614243" y3="-3.73412123" z3="3.93910561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21642111" y3="-3.65142634" z3="-6.01555641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44465527" y3="-2.66292762" z3="-4.55837416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06847213" y3="1.16499093" z3="-1.4858877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10791131" y3="1.5531529" z3="-2.4648262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43670711" y3="1.49813229" z3="-1.68164338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84630547" y3="2.16674103" z3="-2.80921831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16267075" y3="1.20013064" z3="-0.91891334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90212921" y3="2.41126246" z3="-2.9519354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56775103" y3="2.22559862" z3="-3.6312618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89898929" y3="2.52397144" z3="-3.79854551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84662043" y3="2.49710676" z3="-4.40573224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2300814" y3="3.03440673" z3="-4.70714761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39683435" y3="3.14836552" z3="-3.32651601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2813736" y3="3.55951806" z3="-4.11420766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20215535" y3="4.16039461" z3="-2.73121122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94957715" y3="5.49297742" z3="-2.95446376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03074444" y3="3.87255499" z3="-2.08222997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58505813" y3="6.24927994" z3="-2.4849568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05403379" y3="4.94559579" z3="-4.33847058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8729275" y3="5.89527746" z3="-3.77998116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2025439" y3="5.24213706" z3="-4.95880917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68738087" y3="6.95838016" z3="-3.95703979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47986823" y3="-2.19348819" z3="-0.2913183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45317997" y3="-2.98588613" z3="-1.05840673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00607091" y3="-2.57536395" z3="0.59806918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09540505" y3="-1.37314927" z3="-0.70705816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17962532" y3="-1.42142991" z3="-1.14986312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31809111" y3="-0.38128879" z3="-1.49709173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1040981" y3="-1.54449493" z3="-0.9477334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42569661" y3="-2.0752058" z3="-2.00162115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3387,.0465,-.1903;7.3841,.1674,.4206;6.6447,.4407,-.3385;4.7256,1.2334,-2.2586;4.3866,.4296,-1.1825;2.7272,.8412,-3.6598;3.6303,1.7447,-3.131;1.3772,2.5847,-4.6118;1.559,1.2439,-4.3724;.4979,2.9191,-5.1711;2.9258,-.489,-3.4413;3.0973,.0374,-1.0009;2.4024,-1.1058,-2.0025;.9306,-.9779,-1.8298;3.1065,-2.4295,-1.8499;-.1417,-3.6108,.6698;-.0164,-5.258,-4.744;-.2446,-4.9989,-3.7066;-.8412,-4.3052,-1.0879;.7805,-4.5919,-2.8549;-1.5608,-5.0854,-3.2488;-1.8599,-4.733,-1.9351;.4943,-4.26,-1.5291;1.8143,-4.5155,-3.2018;-2.3595,-5.3988,-3.9239;-2.8969,-4.7678,-1.5919;-1.03,-3.8557,.2327;-2.1698,-3.6435,.8787;-3.0576,-4.1062,.4451;-2.1643,-3.5093,2.3457;-2.2225,-3.3266,5.1436;-3.3607,-3.7129,3.049;-.9965,-3.2209,3.0676;-1.0231,-3.13,4.4562;-3.3887,-3.6239,4.4379;-4.276,-3.951,2.5007;-.0354,-3.0909,2.5631;-.0931,-2.9267,4.995;-4.3265,-3.7948,4.9728;-2.2425,-3.264,6.2352;1.4152,-3.897,-.6254;2.1763,-3.3967,-1.0787;.5202,.2377,-4.7116;-3.0803,-1.7168,.0233;-2.9013,-.9651,1.1836;-1.839,-.3138,1.513;-.3641,.5582,1.2134;-.4391,1.4519,-.4162;.9863,-.6983,1.3982;-.3517,1.757,2.6532;-3.8734,-.9548,2.0846;-3.6398,-.3419,3.3429;-.2041,.7583,-1.2413;.3405,2.2373,-.4151;-1.4162,1.9403,-.5777;1.0123,-1.061,2.4391;1.9602,-.2371,1.1612;.8621,-1.5412,.6991;-.4105,1.2225,3.6176;.586,2.3423,2.6501;-1.192,2.4717,2.5988;-2.7767,-.7999,3.8523;-4.5531,-.5149,3.9276;-3.4681,.7402,3.2228;4.84,-.7117,.9919;4.4134,-2.0383,.8521;3.7615,-2.6852,1.8946;3.5528,-1.9925,3.0834;4.0325,-.7009,3.2801;4.6844,-.0675,2.2267;4.5182,-2.5355,-.1136;3.365,-3.6936,1.7704;2.6915,-2.5926,4.1072;3.851,-.1917,4.2274;5.0284,.964,2.3435;-.7978,.458,-4.2897;-1.7773,-.5093,-4.4686;-1.4286,-1.701,-5.0938;-.1413,-1.9319,-5.5694;.8313,-.9614,-5.3672;-1.0434,1.3813,-3.7585;-2.7967,-.3632,-4.1104;-2.4409,-2.7496,-5.2372;.0896,-2.8721,-6.0706;1.8537,-1.1473,-5.7002;2.3611,-1.8986,5.0489;2.3161,-3.7341,3.9391;-2.2164,-3.6514,-6.0156;-3.4447,-2.6629,-4.5584;7.0685,1.165,-1.4859;6.1079,1.5532,-2.4648;8.4367,1.4981,-1.6816;8.8463,2.1667,-2.8092;9.1627,1.2001,-.9189;9.9021,2.4113,-2.9519;6.5678,2.2256,-3.6313;7.899,2.524,-3.7985;5.8466,2.4971,-4.4057;8.2301,3.0344,-4.7071;3.3968,3.1484,-3.3265;2.2814,3.5595,-4.1142;4.2022,4.1604,-2.7312;3.9496,5.493,-2.9545;5.0307,3.8726,-2.0822;4.5851,6.2493,-2.485;2.054,4.9456,-4.3385;2.8729,5.8953,-3.78;1.2025,5.2421,-4.9588;2.6874,6.9584,-3.957;-4.4799,-2.1935,-.2913;-4.4532,-2.9859,-1.0584;-5.0061,-2.5754,.5981;-5.0954,-1.3731,-.7071;-2.1796,-1.4214,-1.1499;-2.3181,-.3813,-1.4971;-1.1041,-1.5445,-.9477;-2.4257,-2.0752,-2.0016;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650419525226</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002331496519 0.000311658840 0.024042996361 0.005340191360</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030639378 -0.001461043 -0.000178229 0.000095822 0.000149585 0.000227720 0.000378979 0.000413717 0.000577189 0.000793151 0.000936093 0.001058747 0.001283496 0.001330324 0.001372029 0.001421450 0.001632687 0.001808566 0.001833346 0.001963894 0.002137507 0.002501973 0.002590642 0.002724052 0.002864952 0.002951320 0.003163303 0.003461989 0.003777535 0.003955673 0.004438743 0.004755853 0.004809033 0.005092005 0.005995302 0.006058593 0.006202664 0.006623535 0.006861000 0.007604515 0.008092146 0.008197686 0.009236068 0.009562168 0.010000882 0.010685334 0.011042660 0.011505642 0.011649779 0.012257864 0.012854808 0.013194113 0.014003162 0.014429809 0.015038216 0.015385627 0.015697380 0.016229419 0.016847503 0.017461884 0.017645774 0.018107053 0.019396003 0.019512194 0.019969882 0.020806421 0.021208040 0.021416715 0.022441730 0.023130772 0.025187405 0.025974216 0.026763223 0.026983429 0.027458707 0.029265841 0.029508484 0.031413412 0.033285796 0.033497366 0.033897963 0.035823146 0.036847237 0.037611972 0.039618012 0.039983284 0.040774949 0.042268661 0.044300218 0.045040901 0.045442244 0.046907061 0.047667695 0.049205930 0.050318823 0.050808662 0.051033137 0.051245735 0.052478762 0.052593645 0.052875546 0.053040585 0.054708878 0.054833179 0.055849076 0.056213832 0.056497065 0.056573546 0.057036470 0.058409996 0.060327148 0.060800236 0.061619428 0.062113891 0.063195258 0.064398349 0.065122379 0.065822546 0.066349123 0.067830107 0.068953990 0.070241234 0.072691281 0.074463688 0.074533595 0.076187767 0.077987102 0.083618983 0.085334149 0.086925247 0.087260136 0.088051936 0.090412122 0.090941417 0.092995851 0.094600621 0.095279350 0.096343909 0.097360607 0.097893153 0.098880859 0.099923819 0.100290637 0.102382921 0.102987517 0.103366677 0.103503924 0.104046805 0.105755045 0.106871481 0.107394075 0.109579657 0.110593357 0.111746358 0.112536169 0.114618029 0.115043457 0.116277639 0.117566167 0.119504128 0.120830060 0.122129928 0.123052384 0.124577019 0.125556719 0.126263180 0.126972097 0.131781070 0.135019604 0.135740224 0.142727476 0.143554258 0.146960695 0.147300566 0.149669911 0.152389540 0.154713371 0.156076842 0.156660953 0.161509143 0.161816530 0.173381986 0.174003141 0.179814150 0.184090221 0.185346072 0.189372622 0.190167370 0.193956919 0.194100655 0.198342157 0.200138171 0.205101101 0.206893363 0.207242107 0.210058640 0.213977410 0.216392361 0.217638472 0.218271579 0.220675197 0.225169932 0.226226146 0.232021328 0.235016846 0.235435258 0.235891300 0.244567670 0.255955117 0.257233377 0.263483495 0.269797854 0.280338155 0.282888955 0.286203709 0.291550619 0.296685605 0.304314849 0.305699072 0.307256918 0.314000154 0.316639221 0.317327521 0.321996546 0.329684817 0.332754307 0.351741003 0.352049362 0.354821027 0.355751030 0.359984706 0.362776188 0.363710881 0.384315093 0.386041707 0.391859210 0.410648656 0.425431354 0.430337489 0.461866907 0.468641934 0.478068239 0.483582757 0.483981798 0.487545026 0.491237669 0.509271741 0.515219573 0.535178470 0.566227892 0.573152566 0.592236157 0.593618141 0.606413838 0.607951688 0.644612654 0.646761036 0.648894420 0.674255035 0.677775534 0.685357399 0.691521562 0.693491342 0.699747700 0.704400598 0.717269845 0.741244580 0.751228922 0.758924007 0.768631890 0.772552276 0.778775112 0.810686659 0.814237832 0.818933403 0.821632606 0.823392585 0.831484167 0.833693662 0.835863927 0.841853011 0.845569859 0.847143111 0.848807778 0.858928089 0.865883353 0.866359691 0.873847528 0.883520096 0.884553092 0.889541065 0.895750555 0.900777274 0.904019035 0.923302108 0.923909429 0.933836223 0.935544710 0.965819781 0.975795431 0.985990304 1.001124640 1.018283153 1.027900681 1.041687368 1.050734656 1.057423098 1.068502388 1.086584417 1.088600194 1.104296805 1.106316187 1.112303520 1.122951646 1.124409687 1.135753535 1.143637371 1.174287107 1.178470407 1.181028265 1.186443424 1.191209367 1.196144551 1.224316913 1.228245160 1.274667856 1.301434683 1.319430971 1.328103561 1.332843454 1.335419913 1.335976756 1.341950573 1.343001002 1.344915625 1.358991538 1.378652752 1.382890752 1.384243941 1.415220131 1.419799987 1.436173006 1.551469646 1.681330783 1.775977492</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">214</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33885085" y3="0.05185305" z3="-0.19017722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38522111" y3="0.16904393" z3="0.41833327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64559142" y3="0.44289599" z3="-0.34031376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72617472" y3="1.23664265" z3="-2.2598119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38661018" y3="0.43513907" z3="-1.18213447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72738489" y3="0.84357872" z3="-3.66028072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63105318" y3="1.74745952" z3="-3.13295797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37757576" y3="2.58734875" z3="-4.6134699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55929693" y3="1.24616364" z3="-4.37301044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49821374" y3="2.92166586" z3="-5.17269232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.925232" y3="-0.48643169" z3="-3.43934645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0966465" y3="0.04440932" z3="-0.99955118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4012133" y3="-1.10008984" z3="-1.99933759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92944962" y3="-0.97093933" z3="-1.82701378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10462855" y3="-2.42376821" z3="-1.844131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14202851" y3="-3.61403785" z3="0.67271817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01402549" y3="-5.25159731" z3="-4.74438794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24251842" y3="-4.9946542" z3="-3.70652329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84122393" y3="-4.30452027" z3="-1.08689197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78230171" y3="-4.58807494" z3="-2.85384095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55899103" y3="-5.08278073" z3="-3.2491005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85925349" y3="-4.73228988" z3="-1.93508784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49494296" y3="-4.25793913" z3="-1.52780948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8146619" y3="-4.50701366" z3="-3.19986919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35870496" y3="-5.39481387" z3="-3.92502432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89564316" y3="-4.77057357" z3="-1.59237326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0309919" y3="-3.85660732" z3="0.23406672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17139217" y3="-3.64465098" z3="0.8790633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05859327" y3="-4.10708949" z3="0.44437826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16714472" y3="-3.51201876" z3="2.34634463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22630486" y3="-3.33298125" z3="5.14481295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36488394" y3="-3.7134822" z3="3.04807184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99918989" y3="-3.22729588" z3="3.06993329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02625" y3="-3.13782008" z3="4.45881126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39369201" y3="-3.62600002" z3="4.43717095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28082293" y3="-3.94795162" z3="2.49828008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0396814" y3="-3.09542819" z3="2.5669755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09713629" y3="-2.93500171" z3="4.99854818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33321232" y3="-3.79419093" z3="4.97104332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24708429" y3="-3.27091998" z3="6.23650985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41526594" y3="-3.89486378" z3="-0.62327206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17452146" y3="-3.39142165" z3="-1.07506619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52083841" y3="0.23950332" z3="-4.71160748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08085766" y3="-1.71740101" z3="0.02446304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90516633" y3="-0.96675441" z3="1.18643097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84517219" y3="-0.31353469" z3="1.51930756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36493762" y3="0.55195567" z3="1.22052363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44149414" y3="1.45462962" z3="-0.4041903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98177364" y3="-0.71017086" z3="1.39634506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34292802" y3="1.74219413" z3="2.6669672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87915418" y3="-0.95904874" z3="2.0854202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65041998" y3="-0.34537689" z3="3.34394854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20582428" y3="0.76509052" z3="-1.23335751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33331385" y3="2.24304624" z3="-0.39869636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42062491" y3="1.94110256" z3="-0.56267289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00900499" y3="-1.07648941" z3="2.43602592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9560333" y3="-0.24977293" z3="1.1588866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85455967" y3="-1.55016281" z3="0.69446466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40767035" y3="1.20259505" z3="3.62866822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60035083" y3="2.31826105" z3="2.66777253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17604464" y3="2.4659451" z3="2.61617795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78824473" y3="-0.80148843" z3="3.85604138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56512743" y3="-0.5197987" z3="3.92603173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47968508" y3="0.73699774" z3="3.22377429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8398776" y3="-0.70517586" z3="0.99292135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41810229" y3="-2.03373599" z3="0.85528411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7657419" y3="-2.68023336" z3="1.89778109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5525959" y3="-1.98535848" z3="3.08483532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02691673" y3="-0.6914426" z3="3.2791431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67861449" y3="-0.0583309" z3="2.22546588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52572704" y3="-2.53277343" z3="-0.1096113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37214448" y3="-3.69023415" z3="1.77467898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69067524" y3="-2.58584836" z3="4.10802427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84106175" y3="-0.18041798" z3="4.22432787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01767566" y3="0.97480694" z3="2.3396538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79673637" y3="0.45854674" z3="-4.28730011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77586672" y3="-0.50989153" z3="-4.46931681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42643155" y3="-1.70039241" z3="-5.09545045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13909256" y3="-1.92995327" z3="-5.57078792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83267579" y3="-0.95873373" z3="-5.36899933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04280888" y3="1.38112398" z3="-3.75555853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79519288" y3="-0.36494704" z3="-4.11047475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43781287" y3="-2.74955476" z3="-5.23905101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09228606" y3="-2.86949293" z3="-6.07224485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85497835" y3="-1.14352948" z3="-5.70299613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36054038" y3="-1.89232162" z3="5.05049296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31479583" y3="-3.72742272" z3="3.93870817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21166814" y3="-3.65060273" z3="-6.01827108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.442677" y3="-2.66532422" z3="-4.56054122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06975747" y3="1.16446799" z3="-1.4892928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10902092" y3="1.55320104" z3="-2.46783647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43860557" y3="1.49383218" z3="-1.68721004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84850446" y3="2.15880618" z3="-2.81657844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16518609" y3="1.19683636" z3="-0.92444535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90538475" y3="2.40287911" z3="-2.96034443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56930606" y3="2.2226477" z3="-3.63588864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90081353" y3="2.51634401" z3="-3.80546768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8480905" y3="2.49449954" z3="-4.41010721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23223042" y3="3.02599564" z3="-4.71497634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39894879" y3="3.15086361" z3="-3.33151148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28317249" y3="3.56169606" z3="-4.11900893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20622575" y3="4.16311843" z3="-2.73962226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95501801" y3="5.49574116" z3="-2.96562814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03499875" y3="3.8757512" z3="-2.09071007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59164136" y3="6.25261923" z3="-2.49826604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05783572" y3="4.94705114" z3="-4.34701489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87829443" y3="5.89730659" z3="-3.79134346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20614479" y3="5.24338631" z3="-4.96714286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69404446" y3="6.96022207" z3="-3.9710551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47904604" y3="-2.19518834" z3="-0.29398798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44988302" y3="-2.98663824" z3="-1.06216749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00700645" y3="-2.57876278" z3="0.59410002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09390857" y3="-1.37486653" z3="-0.71024209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17905932" y3="-1.41889276" z3="-1.14637793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31470133" y3="-0.37692324" z3="-1.4927555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10034394" y3="-1.54796113" z3="-0.94353821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41732574" y3="-2.07240049" z3="-1.99664357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3389,.0519,-.1902;7.3852,.169,.4183;6.6456,.4429,-.3403;4.7262,1.2366,-2.2598;4.3866,.4351,-1.1821;2.7274,.8436,-3.6603;3.6311,1.7475,-3.133;1.3776,2.5873,-4.6135;1.5593,1.2462,-4.373;.4982,2.9217,-5.1727;2.9252,-.4864,-3.4393;3.0966,.0444,-.9996;2.4012,-1.1001,-1.9993;.9294,-.9709,-1.827;3.1046,-2.4238,-1.8441;-.142,-3.614,.6727;-.014,-5.2516,-4.7444;-.2425,-4.9947,-3.7065;-.8412,-4.3045,-1.0869;.7823,-4.5881,-2.8538;-1.559,-5.0828,-3.2491;-1.8593,-4.7323,-1.9351;.4949,-4.2579,-1.5278;1.8147,-4.507,-3.1999;-2.3587,-5.3948,-3.925;-2.8956,-4.7706,-1.5924;-1.031,-3.8566,.2341;-2.1714,-3.6447,.8791;-3.0586,-4.1071,.4444;-2.1671,-3.512,2.3463;-2.2263,-3.333,5.1448;-3.3649,-3.7135,3.0481;-.9992,-3.2273,3.0699;-1.0263,-3.1378,4.4588;-3.3937,-3.626,4.4372;-4.2808,-3.948,2.4983;-.0397,-3.0954,2.567;-.0971,-2.935,4.9985;-4.3332,-3.7942,4.971;-2.2471,-3.2709,6.2365;1.4153,-3.8949,-.6233;2.1745,-3.3914,-1.0751;.5208,.2395,-4.7116;-3.0809,-1.7174,.0245;-2.9052,-.9668,1.1864;-1.8452,-.3135,1.5193;-.3649,.552,1.2205;-.4415,1.4546,-.4042;.9818,-.7102,1.3963;-.3429,1.7422,2.667;-3.8792,-.959,2.0854;-3.6504,-.3454,3.3439;-.2058,.7651,-1.2334;.3333,2.243,-.3987;-1.4206,1.9411,-.5627;1.009,-1.0765,2.436;1.956,-.2498,1.1589;.8546,-1.5502,.6945;-.4077,1.2026,3.6287;.6004,2.3183,2.6678;-1.176,2.4659,2.6162;-2.7882,-.8015,3.856;-4.5651,-.5198,3.926;-3.4797,.737,3.2238;4.8399,-.7052,.9929;4.4181,-2.0337,.8553;3.7657,-2.6802,1.8978;3.5526,-1.9854,3.0848;4.0269,-.6914,3.2791;4.6786,-.0583,2.2255;4.5257,-2.5328,-.1096;3.3721,-3.6902,1.7747;2.6907,-2.5858,4.108;3.8411,-.1804,4.2243;5.0177,.9748,2.3397;-.7967,.4585,-4.2873;-1.7759,-.5099,-4.4693;-1.4264,-1.7004,-5.0955;-.1391,-1.93,-5.5708;.8327,-.9587,-5.369;-1.0428,1.3811,-3.7556;-2.7952,-.3649,-4.1105;-2.4378,-2.7496,-5.2391;.0923,-2.8695,-6.0722;1.855,-1.1435,-5.703;2.3605,-1.8923,5.0505;2.3148,-3.7274,3.9387;-2.2117,-3.6506,-6.0183;-3.4427,-2.6653,-4.5605;7.0698,1.1645,-1.4893;6.109,1.5532,-2.4678;8.4386,1.4938,-1.6872;8.8485,2.1588,-2.8166;9.1652,1.1968,-.9244;9.9054,2.4029,-2.9603;6.5693,2.2226,-3.6359;7.9008,2.5163,-3.8055;5.8481,2.4945,-4.4101;8.2322,3.026,-4.715;3.3989,3.1509,-3.3315;2.2832,3.5617,-4.119;4.2062,4.1631,-2.7396;3.955,5.4957,-2.9656;5.035,3.8758,-2.0907;4.5916,6.2526,-2.4983;2.0578,4.9471,-4.347;2.8783,5.8973,-3.7913;1.2061,5.2434,-4.9671;2.694,6.9602,-3.9711;-4.479,-2.1952,-.294;-4.4499,-2.9866,-1.0622;-5.007,-2.5788,.5941;-5.0939,-1.3749,-.7102;-2.1791,-1.4189,-1.1464;-2.3147,-.3769,-1.4928;-1.1003,-1.548,-.9435;-2.4173,-2.0724,-1.9966;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412012901</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003112724459 0.000418325313 0.027516977533 0.005338874131</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030639494 -0.001264127 0.000004135 0.000072545 0.000195863 0.000236772 0.000381124 0.000414153 0.000578249 0.000796243 0.000936556 0.001055382 0.001281132 0.001333770 0.001368554 0.001423067 0.001633984 0.001812411 0.001832837 0.001965006 0.002147266 0.002497788 0.002590483 0.002714398 0.002873517 0.002937810 0.003152607 0.003462345 0.003769802 0.003953585 0.004442443 0.004748554 0.004811864 0.005093772 0.005995138 0.006059306 0.006198201 0.006623923 0.006868305 0.007614533 0.008098379 0.008204193 0.009253630 0.009564540 0.010000782 0.010695414 0.011042528 0.011477373 0.011648446 0.012255047 0.012863511 0.013197405 0.014001574 0.014438208 0.015046790 0.015387345 0.015695395 0.016227855 0.016852575 0.017471654 0.017643002 0.018106818 0.019401634 0.019519193 0.019973026 0.020806817 0.021207918 0.021419391 0.022442102 0.023130602 0.025188687 0.025975893 0.026772201 0.026982838 0.027461138 0.029265976 0.029509268 0.031419889 0.033286175 0.033498197 0.033903564 0.035818375 0.036855501 0.037622668 0.039617831 0.039984248 0.040776932 0.042276813 0.044301465 0.045061364 0.045443355 0.046916683 0.047680003 0.049206243 0.050324270 0.050808664 0.051034552 0.051253909 0.052478793 0.052593784 0.052875592 0.053041546 0.054711836 0.054855060 0.055868677 0.056222489 0.056497524 0.056585624 0.057036416 0.058419119 0.060327469 0.060815080 0.061619841 0.062115018 0.063198308 0.064403089 0.065122668 0.065822948 0.066355301 0.067838055 0.068954323 0.070241947 0.072692309 0.074463244 0.074534565 0.076190747 0.078027007 0.083618932 0.085343531 0.086941755 0.087264842 0.088053015 0.090414926 0.090943322 0.092996798 0.094600760 0.095279458 0.096363841 0.097371928 0.097898011 0.098881189 0.099936198 0.100300569 0.102396999 0.103001455 0.103371314 0.103524601 0.104115674 0.105756752 0.106875860 0.107393972 0.109594479 0.110622697 0.111796753 0.112538204 0.114787151 0.115179962 0.116293118 0.117977080 0.119715301 0.120871612 0.122289334 0.123111325 0.124607862 0.125568278 0.126266874 0.126985188 0.131791213 0.135022796 0.135745168 0.142728092 0.143555067 0.146963699 0.147301780 0.149671064 0.152399826 0.154724736 0.156115239 0.156672887 0.161513634 0.161817194 0.173411857 0.174011987 0.179817327 0.184109803 0.185345888 0.189379813 0.190188842 0.193959468 0.194109016 0.198342128 0.200138991 0.205114921 0.206894788 0.207246860 0.210061812 0.214026007 0.216402542 0.217639938 0.218312098 0.220679960 0.225171323 0.226226458 0.232023146 0.235018414 0.235440498 0.235891367 0.244568650 0.255957014 0.257234120 0.263493745 0.269806091 0.280339851 0.282890006 0.286204434 0.291554849 0.296690274 0.304314827 0.305705046 0.307258745 0.314008500 0.316640647 0.317328283 0.322017903 0.329689631 0.332758012 0.351749045 0.352054671 0.354829705 0.355755890 0.359985933 0.362776993 0.363718298 0.384317826 0.386044192 0.391859829 0.410651110 0.425434116 0.430442687 0.461930849 0.468644947 0.478127819 0.483584371 0.484064396 0.487554216 0.491253069 0.509303050 0.515226408 0.535180732 0.566275960 0.573162065 0.592243267 0.593625869 0.606414656 0.607961332 0.644636303 0.646763974 0.648929168 0.674259291 0.677775803 0.685410269 0.691527655 0.693499926 0.699819284 0.704400876 0.717278732 0.741244671 0.751229176 0.758950263 0.768766285 0.772566299 0.778775990 0.810729581 0.814412648 0.818991730 0.821633451 0.823396993 0.831486903 0.833757296 0.835868387 0.841960455 0.845609782 0.847250015 0.848957073 0.858934401 0.865883936 0.866474484 0.873859254 0.883535526 0.884583567 0.889555821 0.896584012 0.900800861 0.904025815 0.923368257 0.924497249 0.933946552 0.935663559 0.965832235 0.975813371 0.986005706 1.001129079 1.018308748 1.027925839 1.041689411 1.050762173 1.057435768 1.068519851 1.086586461 1.088618141 1.104302830 1.106339071 1.112310426 1.123132119 1.124459045 1.135754809 1.143641459 1.174287929 1.178540204 1.181032496 1.186452829 1.191242670 1.196154246 1.224357074 1.228245403 1.274729015 1.301449111 1.319437562 1.328107907 1.332847775 1.335424126 1.336031282 1.341996559 1.343018750 1.344925036 1.358993693 1.378656274 1.382893092 1.384244708 1.415300907 1.419867559 1.436262424 1.551472394 1.681363768 1.775982882</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">215</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33497516" y3="0.05671715" z3="-0.18800122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38140173" y3="0.17174381" z3="0.42011856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64210115" y3="0.44589918" z3="-0.33866806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72362168" y3="1.23964746" z3="-2.2588604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38333017" y3="0.43947286" z3="-1.18043328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72597636" y3="0.84401205" z3="-3.65937657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62892738" y3="1.74897283" z3="-3.1331293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37624926" y3="2.58472192" z3="-4.61675566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55794249" y3="1.24482862" z3="-4.37322047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49690973" y3="2.91741487" z3="-5.17712024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9250266" y3="-0.48579209" z3="-3.4374328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09342474" y3="0.04851289" z3="-0.99828622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40061589" y3="-1.09866361" z3="-1.99721748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92838038" y3="-0.97109914" z3="-1.82716801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10575395" y3="-2.42105165" z3="-1.83909831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14367978" y3="-3.61343631" z3="0.67255171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0074032" y3="-5.25023301" z3="-4.74353545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23808172" y3="-4.99166434" z3="-3.70657619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84034973" y3="-4.30090212" z3="-1.08869129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78534931" y3="-4.5859649" z3="-2.85209735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55529358" y3="-5.07788438" z3="-3.2521986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85719272" y3="-4.72713444" z3="-1.93882875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49611493" y3="-4.25521809" z3="-1.52677514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82016037" y3="-4.51019513" z3="-3.19640353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3528864" y3="-5.38997579" z3="-3.92945643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89510279" y3="-4.76194036" z3="-1.59803803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03164603" y3="-3.85473345" z3="0.2325088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1722048" y3="-3.64287212" z3="0.87724953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06036341" y3="-4.10220704" z3="0.44041314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1687535" y3="-3.51347158" z3="2.34485419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23115411" y3="-3.33820656" z3="5.14331326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36734041" y3="-3.71267692" z3="3.04540637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00073008" y3="-3.23453024" z3="3.06994327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02880952" y3="-3.14783914" z3="4.45880274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39766965" y3="-3.62693532" z3="4.43445678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28260422" y3="-3.94451949" z3="2.49477741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03795515" y3="-3.1096279" z3="2.56796062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09817323" y3="-2.95174451" z3="4.99966439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33837898" y3="-3.79211282" z3="4.96713047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25296422" y3="-3.27857605" z3="6.23502185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41510951" y3="-3.89355564" z3="-0.62044599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17597335" y3="-3.390217" z3="-1.0709203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52050342" y3="0.23693098" z3="-4.71226152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07998546" y3="-1.7118234" z3="0.02692492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90474968" y3="-0.96214622" z3="1.18929603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84566355" y3="-0.30723971" z3="1.52285665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36053148" y3="0.54781727" z3="1.22325293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43490082" y3="1.45728381" z3="-0.39808644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97808055" y3="-0.72369173" z3="1.39100286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32464803" y3="1.73188279" z3="2.67428964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87915622" y3="-0.95590188" z3="2.0878236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65021248" y3="-0.34531034" z3="3.34810949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20038266" y3="0.77086863" z3="-1.22933531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34447447" y3="2.24313036" z3="-0.38995114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41237516" y3="1.94622856" z3="-0.55503615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0043178" y3="-1.09599251" z3="2.42850819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95393537" y3="-0.26601011" z3="1.1560606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84676346" y3="-1.55860343" z3="0.68380843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39529921" y3="1.18864717" z3="3.63317238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.62636887" y3="2.29541574" z3="2.67732851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.14852766" y3="2.4658026" z3="2.62685718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78627584" y3="-0.80167559" z3="3.85794067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56388331" y3="-0.52329977" z3="3.93062346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48219896" y3="0.73774554" z3="3.23103646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83521295" y3="-0.69904931" z3="0.99543414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42058027" y3="-2.03005402" z3="0.8601591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7698296" y3="-2.67736292" z3="1.90330068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55005611" y3="-1.98059254" z3="3.08780131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01641294" y3="-0.68336848" z3="3.27963727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66723591" y3="-0.04950365" z3="2.22587129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53380924" y3="-2.53102094" z3="-0.10265724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38299801" y3="-3.68989323" z3="1.78291292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6901885" y3="-2.58340634" z3="4.11149725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82577012" y3="-0.17098898" z3="4.22344729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00126541" y3="0.98584608" z3="2.33877971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79733531" y3="0.45456595" z3="-4.2891917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77544188" y3="-0.51361033" z3="-4.46962065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42549864" y3="-1.70340089" z3="-5.09769471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13815449" y3="-1.9320043" z3="-5.57423728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83322889" y3="-0.96046221" z3="-5.36942989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04378059" y3="1.3765395" z3="-3.75603893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79489816" y3="-0.36966546" z3="-4.11062253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43662044" y3="-2.75241175" z3="-5.24382445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09431921" y3="-2.87080985" z3="-6.07782168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85588916" y3="-1.14413362" z3="-5.70323298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35719748" y3="-1.89100658" z3="5.05313153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31879656" y3="-3.7260805" z3="3.94325544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21032117" y3="-3.65262415" z3="-6.02367573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44101446" y3="-2.66763734" z3="-4.56600853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06697539" y3="1.16577604" z3="-1.4884993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10662556" y3="1.55499652" z3="-2.4671811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43621246" y3="1.49268547" z3="-1.68736083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84686765" y3="2.15634867" z3="-2.81760612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16215219" y3="1.19415614" z3="-0.92484011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90344648" y3="2.3956231" z3="-2.96289865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56739712" y3="2.22267424" z3="-3.63613682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89955713" y3="2.51474618" z3="-3.8064793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84634275" y3="2.49507405" z3="-4.41030815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23132242" y3="3.02049632" z3="-4.71722533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39656064" y3="3.15195566" z3="-3.33401737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28110881" y3="3.56079496" z3="-4.12291099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20376539" y3="4.16555478" z3="-2.74396412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95331427" y3="5.4973569" z3="-2.97372163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0326566" y3="3.8794117" z3="-2.09462506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59101846" y3="6.25464823" z3="-2.50928158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05537842" y3="4.94612936" z3="-4.35314303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87628698" y3="5.89732336" z3="-3.79991448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20379041" y3="5.24099948" z3="-4.97413199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69227614" y3="6.95990492" z3="-3.98198405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47925321" y3="-2.18810392" z3="-0.29163356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45127497" y3="-2.97867309" z3="-1.06098498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00736269" y3="-2.5724703" z3="0.5957437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09423624" y3="-1.36670596" z3="-0.7061011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17711738" y3="-1.41403994" z3="-1.14419455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31574902" y3="-0.37348003" z3="-1.490069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10235655" y3="-1.5366101" z3="-0.9413322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42302753" y3="-2.06679163" z3="-1.99806855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.335,.0567,-.188;7.3814,.1717,.4201;6.6421,.4459,-.3387;4.7236,1.2396,-2.2589;4.3833,.4395,-1.1804;2.726,.844,-3.6594;3.6289,1.749,-3.1331;1.3762,2.5847,-4.6168;1.5579,1.2448,-4.3732;.4969,2.9174,-5.1771;2.925,-.4858,-3.4374;3.0934,.0485,-.9983;2.4006,-1.0987,-1.9972;.9284,-.9711,-1.8272;3.1058,-2.4211,-1.8391;-.1437,-3.6134,.6726;-.0074,-5.2502,-4.7435;-.2381,-4.9917,-3.7066;-.8403,-4.3009,-1.0887;.7853,-4.586,-2.8521;-1.5553,-5.0779,-3.2522;-1.8572,-4.7271,-1.9388;.4961,-4.2552,-1.5268;1.8202,-4.5102,-3.1964;-2.3529,-5.39,-3.9295;-2.8951,-4.7619,-1.598;-1.0316,-3.8547,.2325;-2.1722,-3.6429,.8772;-3.0604,-4.1022,.4404;-2.1688,-3.5135,2.3449;-2.2312,-3.3382,5.1433;-3.3673,-3.7127,3.0454;-1.0007,-3.2345,3.0699;-1.0288,-3.1478,4.4588;-3.3977,-3.6269,4.4345;-4.2826,-3.9445,2.4948;-.038,-3.1096,2.568;-.0982,-2.9517,4.9997;-4.3384,-3.7921,4.9671;-2.253,-3.2786,6.235;1.4151,-3.8936,-.6204;2.176,-3.3902,-1.0709;.5205,.2369,-4.7123;-3.08,-1.7118,.0269;-2.9047,-.9621,1.1893;-1.8457,-.3072,1.5229;-.3605,.5478,1.2233;-.4349,1.4573,-.3981;.9781,-.7237,1.391;-.3246,1.7319,2.6743;-3.8792,-.9559,2.0878;-3.6502,-.3453,3.3481;-.2004,.7709,-1.2293;.3445,2.2431,-.39;-1.4124,1.9462,-.555;1.0043,-1.096,2.4285;1.9539,-.266,1.1561;.8468,-1.5586,.6838;-.3953,1.1886,3.6332;.6264,2.2954,2.6773;-1.1485,2.4658,2.6269;-2.7863,-.8017,3.8579;-4.5639,-.5233,3.9306;-3.4822,.7377,3.231;4.8352,-.699,.9954;4.4206,-2.0301,.8602;3.7698,-2.6774,1.9033;3.5501,-1.9806,3.0878;4.0164,-.6834,3.2796;4.6672,-.0495,2.2259;4.5338,-2.531,-.1027;3.383,-3.6899,1.7829;2.6902,-2.5834,4.1115;3.8258,-.171,4.2234;5.0013,.9858,2.3388;-.7973,.4546,-4.2892;-1.7754,-.5136,-4.4696;-1.4255,-1.7034,-5.0977;-.1382,-1.932,-5.5742;.8332,-.9605,-5.3694;-1.0438,1.3765,-3.756;-2.7949,-.3697,-4.1106;-2.4366,-2.7524,-5.2438;.0943,-2.8708,-6.0778;1.8559,-1.1441,-5.7032;2.3572,-1.891,5.0531;2.3188,-3.7261,3.9433;-2.2103,-3.6526,-6.0237;-3.441,-2.6676,-4.566;7.067,1.1658,-1.4885;6.1066,1.555,-2.4672;8.4362,1.4927,-1.6874;8.8469,2.1563,-2.8176;9.1622,1.1942,-.9248;9.9034,2.3956,-2.9629;6.5674,2.2227,-3.6361;7.8996,2.5147,-3.8065;5.8463,2.4951,-4.4103;8.2313,3.0205,-4.7172;3.3966,3.152,-3.334;2.2811,3.5608,-4.1229;4.2038,4.1656,-2.744;3.9533,5.4974,-2.9737;5.0327,3.8794,-2.0946;4.591,6.2546,-2.5093;2.0554,4.9461,-4.3531;2.8763,5.8973,-3.7999;1.2038,5.241,-4.9741;2.6923,6.9599,-3.982;-4.4793,-2.1881,-.2916;-4.4513,-2.9787,-1.061;-5.0074,-2.5725,.5957;-5.0942,-1.3667,-.7061;-2.1771,-1.414,-1.1442;-2.3157,-.3735,-1.4901;-1.1024,-1.5366,-.9413;-2.423,-2.0668,-1.9981;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650401342320</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003172793221 0.000430459171 0.020242567053 0.005332078918</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030642048 -0.000728724 0.000010749 0.000072374 0.000201365 0.000244784 0.000396751 0.000415585 0.000581501 0.000796162 0.000937673 0.001055080 0.001280941 0.001337337 0.001368859 0.001422926 0.001637080 0.001813324 0.001832862 0.001971285 0.002143837 0.002497600 0.002592109 0.002716961 0.002869477 0.002940365 0.003154255 0.003463347 0.003770231 0.003953602 0.004443896 0.004750547 0.004810993 0.005095827 0.005998572 0.006062613 0.006199685 0.006624929 0.006874407 0.007624288 0.008098443 0.008204361 0.009259351 0.009564797 0.010002986 0.010704989 0.011043002 0.011477797 0.011652466 0.012255225 0.012882873 0.013199972 0.014001994 0.014440356 0.015057754 0.015390184 0.015695350 0.016228658 0.016858136 0.017477365 0.017666754 0.018106924 0.019405277 0.019526716 0.019976226 0.020806977 0.021208182 0.021419586 0.022446880 0.023131174 0.025188495 0.025983619 0.026774617 0.026991635 0.027462532 0.029266966 0.029510236 0.031421674 0.033286580 0.033498780 0.033909625 0.035818241 0.036860404 0.037632746 0.039617644 0.039983551 0.040777496 0.042282001 0.044301455 0.045075397 0.045443383 0.046930892 0.047696549 0.049206419 0.050325507 0.050808769 0.051038718 0.051259094 0.052478830 0.052594735 0.052875649 0.053042111 0.054712324 0.054864933 0.055880225 0.056229320 0.056497931 0.056592435 0.057036599 0.058426854 0.060327774 0.060823535 0.061620037 0.062115623 0.063198605 0.064405004 0.065123356 0.065822961 0.066365506 0.067843725 0.068956481 0.070241877 0.072693152 0.074463177 0.074534482 0.076191497 0.078066582 0.083619327 0.085346512 0.086957464 0.087269154 0.088053034 0.090416452 0.090944340 0.092997079 0.094600836 0.095287572 0.096380382 0.097379429 0.097901645 0.098881243 0.099945760 0.100309834 0.102407349 0.103014449 0.103371739 0.103545416 0.104165046 0.105756679 0.106877329 0.107396563 0.109606238 0.110661896 0.111840305 0.112540697 0.114845300 0.115346235 0.116304258 0.118282806 0.119936485 0.120910604 0.122509587 0.123247747 0.124643403 0.125588757 0.126268776 0.126997463 0.131810064 0.135023199 0.135745321 0.142730042 0.143556529 0.146972409 0.147303131 0.149674223 0.152404525 0.154742111 0.156134023 0.156689439 0.161513865 0.161819354 0.173432894 0.174020611 0.179819293 0.184124806 0.185346107 0.189379346 0.190206932 0.193972891 0.194108709 0.198342146 0.200139629 0.205151645 0.206895116 0.207246685 0.210062389 0.214078337 0.216405901 0.217641314 0.218336866 0.220687547 0.225171244 0.226226567 0.232023165 0.235020760 0.235445077 0.235894990 0.244569047 0.255959298 0.257234093 0.263494753 0.269812787 0.280341511 0.282889938 0.286204472 0.291557395 0.296692782 0.304317008 0.305707729 0.307264622 0.314018161 0.316640578 0.317330519 0.322045725 0.329693583 0.332757880 0.351753001 0.352054684 0.354841364 0.355758287 0.359990547 0.362777205 0.363718104 0.384318523 0.386045580 0.391866107 0.410651095 0.425434510 0.430556439 0.461969351 0.468646615 0.478174852 0.483586183 0.484119535 0.487568574 0.491255810 0.509350066 0.515236279 0.535187541 0.566328124 0.573162035 0.592243295 0.593626690 0.606414925 0.607962122 0.644657496 0.646763912 0.648962782 0.674259262 0.677775852 0.685443659 0.691542044 0.693500792 0.699860638 0.704400922 0.717284033 0.741244696 0.751229441 0.758969985 0.768884431 0.772577579 0.778777242 0.810789691 0.814580260 0.819084882 0.821634377 0.823399820 0.831489574 0.833823898 0.835878276 0.842036754 0.845646283 0.847339900 0.849106809 0.858948004 0.865884538 0.866553390 0.873867109 0.883551180 0.884633785 0.889576152 0.897432115 0.900808707 0.904030812 0.923386453 0.925295727 0.934104764 0.935848123 0.965833941 0.975819232 0.986019208 1.001136493 1.018322216 1.027947675 1.041689402 1.050762329 1.057438859 1.068544132 1.086591371 1.088637909 1.104303129 1.106352590 1.112315606 1.123285426 1.124514451 1.135755651 1.143653080 1.174288701 1.178559568 1.181038549 1.186469093 1.191249076 1.196164210 1.224379097 1.228248416 1.274791018 1.301483159 1.319437671 1.328109579 1.332847850 1.335425226 1.336108694 1.342022094 1.343028316 1.344925599 1.358998510 1.378657187 1.382893497 1.384244838 1.415386284 1.419907674 1.436346543 1.551474064 1.681366230 1.775983228</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">216</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3319477" y3="0.06285854" z3="-0.18571745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37819662" y3="0.17876462" z3="0.42387126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63942689" y3="0.45165783" z3="-0.3359878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72247913" y3="1.24171889" z3="-2.25949085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38102492" y3="0.44444192" z3="-1.17937805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72595579" y3="0.84353529" z3="-3.66113632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6288755" y3="1.7494672" z3="-3.13620205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37690259" y3="2.58356209" z3="-4.62223267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55854745" y3="1.24330283" z3="-4.37650556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49811023" y3="2.91532183" z3="-5.18383485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92391884" y3="-0.48542812" z3="-3.43529581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09078553" y3="0.05501929" z3="-0.99727518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39876688" y3="-1.09453983" z3="-1.99393629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.926406" y3="-0.96684697" z3="-1.82560294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10433314" y3="-2.41614488" z3="-1.83159059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14604155" y3="-3.61321455" z3="0.67263762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00040323" y3="-5.25062988" z3="-4.74304572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23227575" y3="-4.99111185" z3="-3.70674647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84080839" y3="-4.2971746" z3="-1.09050848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78953253" y3="-4.58546647" z3="-2.85027102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55093359" y3="-5.07505543" z3="-3.25511322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85638557" y3="-4.72202784" z3="-1.94296288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49722583" y3="-4.25348615" z3="-1.52588737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82395772" y3="-4.50833718" z3="-3.19195059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34756549" y3="-5.38718779" z3="-3.9338455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8946254" y3="-4.75642856" z3="-1.60492465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03400623" y3="-3.85216784" z3="0.23082048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17513986" y3="-3.6415495" z3="0.87482228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06245443" y3="-4.09994417" z3="0.43623487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17243605" y3="-3.51646995" z3="2.34288561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23509398" y3="-3.34876356" z3="5.14203197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37230503" y3="-3.71432688" z3="3.04220961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00374138" y3="-3.2425732" z3="3.06947503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03295336" y3="-3.15782552" z3="4.45842085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40254532" y3="-3.63289601" z3="4.43164763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28916658" y3="-3.94078624" z3="2.49028682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0415969" y3="-3.11686988" z3="2.56876377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10361784" y3="-2.96179771" z3="4.99971979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34305345" y3="-3.7991456" z3="4.96342119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2576089" y3="-3.29078465" z3="6.23382621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41431721" y3="-3.89198976" z3="-0.6176769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17479171" y3="-3.38666427" z3="-1.06593445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52059665" y3="0.23584702" z3="-4.71311868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08187771" y3="-1.70802016" z3="0.030007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90488817" y3="-0.96029413" z3="1.19380468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84615351" y3="-0.30530884" z3="1.52757073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35612252" y3="0.54274895" z3="1.2277123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43111369" y3="1.45844232" z3="-0.38962792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97768582" y3="-0.73380094" z3="1.38752822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.309331" y3="1.71962841" z3="2.68441962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87805842" y3="-0.95580822" z3="2.09366989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6472697" y3="-0.34807354" z3="3.35488641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20294855" y3="0.77375751" z3="-1.22478562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3497171" y3="2.24101229" z3="-0.38073918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40722097" y3="1.95329055" z3="-0.5410978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0035976" y3="-1.10988633" z3="2.42348477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9548256" y3="-0.27785614" z3="1.15372638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84418305" y3="-1.56506775" z3="0.67712932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38033156" y3="1.17248536" z3="3.64107128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.64516414" y3="2.27679011" z3="2.68706361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.12828509" y3="2.45966007" z3="2.6438895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78377838" y3="-0.80645728" z3="3.86303655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56091269" y3="-0.52596058" z3="3.93778182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4773154" y3="0.73514526" z3="3.23998564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83210719" y3="-0.69258063" z3="0.99815183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42546005" y3="-2.02619661" z3="0.86487047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77484604" y3="-2.67471231" z3="1.90732702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5477452" y3="-1.97649929" z3="3.08962363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00647213" y3="-0.67624654" z3="3.27994908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65666937" y3="-0.04118054" z3="2.22648714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54415252" y3="-2.52874441" z3="-0.09651698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3931961" y3="-3.68957962" z3="1.7876607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68633954" y3="-2.58116019" z3="4.11091425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.80969402" y3="-0.16266568" z3="4.2216948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.9839526" y3="0.99623067" z3="2.3373984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79700548" y3="0.45438446" z3="-4.28892093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.776001" y3="-0.51376839" z3="-4.47149132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42626943" y3="-1.70359453" z3="-5.09864604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13859853" y3="-1.9329457" z3="-5.57327907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83301394" y3="-0.96209804" z3="-5.37077391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04330196" y3="1.37667395" z3="-3.75669771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79571384" y3="-0.36931651" z3="-4.11330524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43809205" y3="-2.75217824" z3="-5.24519428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09258952" y3="-2.87200844" z3="-6.0754029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85542226" y3="-1.1464561" z3="-5.70439508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34844972" y3="-1.88851102" z3="5.0510279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31847795" y3="-3.72547339" z3="3.94214374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2115471" y3="-3.65245946" z3="-6.02502555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44361575" y3="-2.66816446" z3="-4.56783665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06538837" y3="1.16893874" z3="-1.4868978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10583274" y3="1.55588367" z3="-2.46733607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43496131" y3="1.49467807" z3="-1.68531347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84673393" y3="2.15461778" z3="-2.81686645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16038958" y3="1.198081" z3="-0.92138303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90408361" y3="2.39492999" z3="-2.96132369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5679289" y3="2.22040223" z3="-3.63738085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90023748" y3="2.51106143" z3="-3.80729146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84753125" y3="2.49115398" z3="-4.41278884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23312215" y3="3.01690113" z3="-4.71842665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39726426" y3="3.1521672" z3="-3.34086726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28223756" y3="3.5600214" z3="-4.13098723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20477046" y3="4.16685153" z3="-2.75334336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95495608" y3="5.49847249" z3="-2.98662727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03291063" y3="3.88223097" z3="-2.10239044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59194882" y3="6.2574152" z3="-2.52279176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05778297" y3="4.94455706" z3="-4.36575317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87905982" y3="5.89669673" z3="-3.81504396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20668737" y3="5.23827703" z3="-4.98796361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69601168" y3="6.95880096" z3="-4.00056145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48106479" y3="-2.18286786" z3="-0.28888575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45304098" y3="-2.97181364" z3="-1.05932712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00917127" y3="-2.56841877" z3="0.59782588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09513642" y3="-1.3603321" z3="-0.70229176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18194547" y3="-1.40750756" z3="-1.14194289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31760442" y3="-0.36502657" z3="-1.48620964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10334094" y3="-1.53722313" z3="-0.94200634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42202735" y3="-2.05932087" z3="-1.99304693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3319,.0629,-.1857;7.3782,.1788,.4239;6.6394,.4517,-.336;4.7225,1.2417,-2.2595;4.381,.4444,-1.1794;2.726,.8435,-3.6611;3.6289,1.7495,-3.1362;1.3769,2.5836,-4.6222;1.5585,1.2433,-4.3765;.4981,2.9153,-5.1838;2.9239,-.4854,-3.4353;3.0908,.055,-.9973;2.3988,-1.0945,-1.9939;.9264,-.9668,-1.8256;3.1043,-2.4161,-1.8316;-.146,-3.6132,.6726;.0004,-5.2506,-4.743;-.2323,-4.9911,-3.7067;-.8408,-4.2972,-1.0905;.7895,-4.5855,-2.8503;-1.5509,-5.0751,-3.2551;-1.8564,-4.722,-1.943;.4972,-4.2535,-1.5259;1.824,-4.5083,-3.192;-2.3476,-5.3872,-3.9338;-2.8946,-4.7564,-1.6049;-1.034,-3.8522,.2308;-2.1751,-3.6415,.8748;-3.0625,-4.0999,.4362;-2.1724,-3.5165,2.3429;-2.2351,-3.3488,5.142;-3.3723,-3.7143,3.0422;-1.0037,-3.2426,3.0695;-1.033,-3.1578,4.4584;-3.4025,-3.6329,4.4316;-4.2892,-3.9408,2.4903;-.0416,-3.1169,2.5688;-.1036,-2.9618,4.9997;-4.3431,-3.7991,4.9634;-2.2576,-3.2908,6.2338;1.4143,-3.892,-.6177;2.1748,-3.3867,-1.0659;.5206,.2358,-4.7131;-3.0819,-1.708,.03;-2.9049,-.9603,1.1938;-1.8462,-.3053,1.5276;-.3561,.5427,1.2277;-.4311,1.4584,-.3896;.9777,-.7338,1.3875;-.3093,1.7196,2.6844;-3.8781,-.9558,2.0937;-3.6473,-.3481,3.3549;-.2029,.7738,-1.2248;.3497,2.241,-.3807;-1.4072,1.9533,-.5411;1.0036,-1.1099,2.4235;1.9548,-.2779,1.1537;.8442,-1.5651,.6771;-.3803,1.1725,3.6411;.6452,2.2768,2.6871;-1.1283,2.4597,2.6439;-2.7838,-.8065,3.863;-4.5609,-.526,3.9378;-3.4773,.7351,3.24;4.8321,-.6926,.9982;4.4255,-2.0262,.8649;3.7748,-2.6747,1.9073;3.5477,-1.9765,3.0896;4.0065,-.6762,3.2799;4.6567,-.0412,2.2265;4.5442,-2.5287,-.0965;3.3932,-3.6896,1.7877;2.6863,-2.5812,4.1109;3.8097,-.1627,4.2217;4.984,.9962,2.3374;-.797,.4544,-4.2889;-1.776,-.5138,-4.4715;-1.4263,-1.7036,-5.0986;-.1386,-1.9329,-5.5733;.833,-.9621,-5.3708;-1.0433,1.3767,-3.7567;-2.7957,-.3693,-4.1133;-2.4381,-2.7522,-5.2452;.0926,-2.872,-6.0754;1.8554,-1.1465,-5.7044;2.3484,-1.8885,5.051;2.3185,-3.7255,3.9421;-2.2115,-3.6525,-6.025;-3.4436,-2.6682,-4.5678;7.0654,1.1689,-1.4869;6.1058,1.5559,-2.4673;8.435,1.4947,-1.6853;8.8467,2.1546,-2.8169;9.1604,1.1981,-.9214;9.9041,2.3949,-2.9613;6.5679,2.2204,-3.6374;7.9002,2.5111,-3.8073;5.8475,2.4912,-4.4128;8.2331,3.0169,-4.7184;3.3973,3.1522,-3.3409;2.2822,3.56,-4.131;4.2048,4.1669,-2.7533;3.955,5.4985,-2.9866;5.0329,3.8822,-2.1024;4.5919,6.2574,-2.5228;2.0578,4.9446,-4.3658;2.8791,5.8967,-3.815;1.2067,5.2383,-4.988;2.696,6.9588,-4.0006;-4.4811,-2.1829,-.2889;-4.453,-2.9718,-1.0593;-5.0092,-2.5684,.5978;-5.0951,-1.3603,-.7023;-2.1819,-1.4075,-1.1419;-2.3176,-.365,-1.4862;-1.1033,-1.5372,-.942;-2.422,-2.0593,-1.993;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650395229930</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002664817992 0.000354136555 0.025126249502 0.005345201791</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030645041 -0.000759246 0.000036888 0.000077926 0.000203854 0.000263676 0.000400519 0.000414001 0.000581634 0.000795835 0.000940147 0.001054059 0.001280945 0.001336526 0.001368842 0.001422913 0.001639272 0.001812697 0.001833375 0.001971357 0.002140826 0.002495588 0.002592340 0.002714709 0.002865950 0.002935271 0.003149000 0.003463262 0.003769605 0.003954798 0.004445130 0.004749275 0.004810720 0.005098752 0.006007545 0.006069156 0.006208321 0.006625652 0.006873317 0.007621164 0.008099370 0.008206248 0.009266024 0.009564720 0.010003321 0.010712959 0.011046262 0.011477609 0.011658549 0.012255375 0.012896319 0.013200092 0.014006862 0.014441407 0.015066443 0.015399841 0.015698172 0.016231575 0.016866931 0.017480798 0.017719856 0.018107627 0.019405922 0.019534024 0.019979051 0.020807954 0.021209875 0.021418893 0.022454048 0.023132042 0.025188547 0.025990760 0.026776820 0.026994019 0.027462937 0.029270991 0.029511986 0.031426322 0.033287087 0.033499898 0.033910497 0.035818142 0.036861100 0.037635119 0.039617683 0.039983020 0.040778138 0.042282606 0.044301948 0.045088591 0.045443453 0.046939908 0.047706354 0.049206865 0.050325861 0.050811078 0.051044339 0.051259015 0.052478820 0.052596669 0.052876008 0.053042160 0.054712195 0.054865581 0.055887621 0.056231690 0.056498095 0.056593713 0.057037427 0.058432965 0.060328506 0.060827499 0.061622052 0.062118341 0.063202130 0.064405278 0.065127044 0.065823587 0.066378556 0.067847936 0.068958770 0.070241964 0.072695723 0.074463550 0.074535640 0.076191700 0.078083510 0.083620320 0.085347073 0.086964680 0.087268466 0.088053441 0.090417245 0.090945064 0.092997324 0.094601104 0.095304031 0.096387988 0.097382487 0.097907963 0.098881881 0.099951962 0.100322142 0.102414918 0.103035985 0.103371847 0.103562905 0.104180133 0.105758672 0.106881473 0.107398242 0.109610566 0.110695949 0.111865371 0.112542456 0.114857857 0.115470585 0.116310187 0.118451951 0.120094546 0.120947402 0.122649237 0.123499213 0.124683369 0.125617125 0.126268742 0.127013850 0.131831213 0.135023598 0.135745163 0.142732979 0.143556983 0.146979672 0.147306225 0.149675882 0.152415747 0.154748153 0.156149197 0.156694632 0.161518197 0.161821887 0.173442138 0.174024816 0.179820226 0.184125162 0.185346645 0.189381364 0.190223469 0.193992598 0.194110150 0.198342112 0.200139957 0.205186502 0.206895230 0.207247626 0.210062387 0.214127350 0.216409221 0.217646749 0.218358786 0.220687737 0.225172169 0.226227081 0.232025155 0.235021271 0.235447452 0.235901550 0.244569402 0.255963312 0.257234437 0.263494922 0.269819503 0.280341711 0.282891002 0.286205238 0.291559628 0.296696899 0.304322098 0.305707621 0.307269929 0.314026633 0.316641689 0.317335576 0.322066963 0.329695142 0.332760601 0.351771765 0.352056937 0.354850346 0.355759012 0.360002387 0.362777369 0.363727097 0.384320619 0.386054699 0.391875415 0.410653421 0.425436298 0.430613502 0.462018566 0.468646813 0.478194908 0.483586948 0.484159656 0.487580475 0.491258105 0.509400547 0.515241467 0.535192029 0.566347300 0.573167575 0.592244846 0.593626839 0.606415265 0.607963086 0.644658907 0.646768785 0.648969272 0.674267240 0.677775968 0.685450130 0.691554749 0.693503849 0.699879940 0.704401015 0.717286860 0.741244756 0.751229459 0.758992049 0.768915714 0.772578036 0.778777301 0.810817954 0.814727807 0.819168741 0.821635994 0.823412725 0.831490274 0.833905038 0.835887837 0.842081343 0.845663339 0.847394586 0.849243528 0.858953405 0.865885148 0.866588561 0.873871171 0.883571662 0.884686565 0.889586297 0.897985423 0.900811418 0.904034888 0.923391505 0.925912307 0.934240808 0.935995142 0.965836782 0.975820002 0.986028551 1.001138982 1.018337075 1.027967413 1.041691440 1.050762782 1.057442026 1.068565277 1.086595711 1.088642067 1.104304863 1.106370285 1.112317190 1.123395390 1.124551423 1.135759608 1.143657945 1.174292253 1.178570792 1.181045228 1.186481501 1.191253849 1.196165150 1.224382549 1.228249552 1.274819485 1.301528261 1.319438054 1.328110190 1.332847921 1.335430104 1.336162593 1.342023388 1.343029846 1.344927365 1.359004297 1.378657447 1.382895484 1.384250973 1.415424342 1.419910752 1.436366320 1.551474522 1.681374926 1.776000232</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">217</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33086021" y3="0.06891733" z3="-0.18407522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37615309" y3="0.1848108" z3="0.42740852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63833559" y3="0.45693706" z3="-0.33355138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72374119" y3="1.24482232" z3="-2.26032752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38084908" y3="0.44923364" z3="-1.17905392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7279793" y3="0.84488374" z3="-3.66264912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63142259" y3="1.75130216" z3="-3.13936417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3835607" y3="2.58262212" z3="-4.63295892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56181219" y3="1.24399807" z3="-4.38039862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5058223" y3="2.91381517" z3="-5.19667665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92485775" y3="-0.48427731" z3="-3.43447206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09019447" y3="0.05973111" z3="-0.99703369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39798828" y3="-1.09102748" z3="-1.99247865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92563738" y3="-0.96217621" z3="-1.82496822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10260119" y3="-2.41299696" z3="-1.82833802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14828932" y3="-3.61519667" z3="0.67374924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="0.00168299" y3="-5.24573755" z3="-4.74380861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23192388" y3="-4.98705126" z3="-3.70747378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84172194" y3="-4.29701674" z3="-1.09084237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78919486" y3="-4.58120578" z3="-2.85008628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55044784" y3="-5.07331242" z3="-3.2567275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85623037" y3="-4.7226269" z3="-1.94411599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49610278" y3="-4.25077312" z3="-1.52543966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82451831" y3="-4.5041152" z3="-3.19120093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34678514" y3="-5.38497284" z3="-3.9363439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89479554" y3="-4.75831808" z3="-1.60640754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0359305" y3="-3.85365738" z3="0.23101296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17716578" y3="-3.64428813" z3="0.87500834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06514395" y3="-4.10053738" z3="0.43464261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1756347" y3="-3.520894" z3="2.34294181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23961618" y3="-3.35905585" z3="5.14208387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37497791" y3="-3.72235905" z3="3.04144101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00822028" y3="-3.24572516" z3="3.07018184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0368754" y3="-3.16552466" z3="4.45947094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40621468" y3="-3.64326661" z3="4.43085662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28970587" y3="-3.95092763" z3="2.48888947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04566615" y3="-3.11795413" z3="2.56964339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10622693" y3="-2.97166349" z3="5.00165988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34773059" y3="-3.81005003" z3="4.96210141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26193692" y3="-3.3046949" z3="6.23411757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41273431" y3="-3.88954197" z3="-0.61635378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17364894" y3="-3.38325327" z3="-1.06385573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52236167" y3="0.23639455" z3="-4.71505501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08330099" y3="-1.70766473" z3="0.03256903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90518377" y3="-0.96305008" z3="1.19762442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84501124" y3="-0.31072517" z3="1.53249824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35698472" y3="0.53945809" z3="1.2344016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43391831" y3="1.46065661" z3="-0.38007075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97691966" y3="-0.73833751" z3="1.38842867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.30936292" y3="1.71081986" z3="2.69505966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87804151" y3="-0.95904478" z3="2.09793979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64540113" y3="-0.35504935" z3="3.36063758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20858628" y3="0.7780762" z3="-1.21704924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35151774" y3="2.24017791" z3="-0.37108718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40839519" y3="1.95800914" z3="-0.52855903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00367898" y3="-1.11782972" z3="2.42325208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95386572" y3="-0.28193437" z3="1.15524479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84160003" y3="-1.56756656" z3="0.67551845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.37499658" y3="1.15918184" z3="3.64961631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.64284485" y3="2.27146756" z3="2.69664158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.13130086" y3="2.44711012" z3="2.66008832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78192991" y3="-0.81575074" z3="3.86687814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55848379" y3="-0.53349061" z3="3.94398372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47475796" y3="0.72801197" z3="3.24833064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82997625" y3="-0.68660818" z3="0.99921657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42736857" y3="-2.02148183" z3="0.8657346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77659319" y3="-2.67130188" z3="1.90733543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54500259" y3="-1.9729791" z3="3.08873757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.99904941" y3="-0.67120481" z3="3.27893226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.64977073" y3="-0.03488381" z3="2.22660862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54942137" y3="-2.52418944" z3="-0.09517367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39825957" y3="-3.68727058" z3="1.78767187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68331088" y3="-2.57908439" z3="4.10899422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.79840173" y3="-0.15754929" z3="4.21984121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.9739677" y3="1.00357996" z3="2.33777282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79431295" y3="0.45742897" z3="-4.28993989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77481676" y3="-0.50910269" z3="-4.46829562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42838413" y3="-1.70017965" z3="-5.09599758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14204633" y3="-1.9324996" z3="-5.57298788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83189615" y3="-0.96280386" z3="-5.37022383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03797066" y3="1.3807607" z3="-3.75820811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79320306" y3="-0.3623094" z3="-4.10782157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44220325" y3="-2.74651825" z3="-5.23991525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08775322" y3="-2.8724681" z3="-6.07579471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85384078" y3="-1.14909087" z3="-5.70483813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33689776" y3="-1.88497636" z3="5.04497523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3238011" y3="-3.72603583" z3="3.94354243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21917572" y3="-3.64737332" z3="-6.02010087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4454772" y3="-2.6596167" z3="-4.56039006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06563645" y3="1.1727732" z3="-1.48500463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10749255" y3="1.55802428" z3="-2.4674029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43541974" y3="1.49893278" z3="-1.68197654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84881646" y3="2.15718927" z3="-2.81435441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15966718" y3="1.20457528" z3="-0.91609964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90597199" y3="2.39692252" z3="-2.95791717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57125832" y3="2.21966235" z3="-3.63865343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90377919" y3="2.51028676" z3="-3.80737709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85209481" y3="2.48824601" z3="-4.4159193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23776504" y3="3.01149485" z3="-4.71984225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40242821" y3="3.15347319" z3="-3.34965851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29000986" y3="3.55958386" z3="-4.14422915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21016174" y3="4.16926564" z3="-2.76415778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96334228" y3="5.50009432" z3="-3.00354018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03654542" y3="3.88574086" z3="-2.11051574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60133311" y3="6.25898253" z3="-2.5422751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06844758" y3="4.94362081" z3="-4.38503502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88981979" y3="5.89694317" z3="-3.8357544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21931152" y3="5.23621383" z3="-5.01044206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70876781" y3="6.95869977" z3="-4.0256877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48339063" y3="-2.18140081" z3="-0.28537813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45781152" y3="-2.97197269" z3="-1.05518012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01152989" y3="-2.56501615" z3="0.60264068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09685156" y3="-1.35870984" z3="-0.69921343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18166294" y3="-1.40800711" z3="-1.13870564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.318709" y3="-0.36625234" z3="-1.48226921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10609533" y3="-1.53385516" z3="-0.93777093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42866695" y3="-2.05888197" z3="-1.99309413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3309,.0689,-.1841;7.3762,.1848,.4274;6.6383,.4569,-.3336;4.7237,1.2448,-2.2603;4.3808,.4492,-1.1791;2.728,.8449,-3.6626;3.6314,1.7513,-3.1394;1.3836,2.5826,-4.633;1.5618,1.244,-4.3804;.5058,2.9138,-5.1967;2.9249,-.4843,-3.4345;3.0902,.0597,-.997;2.398,-1.091,-1.9925;.9256,-.9622,-1.825;3.1026,-2.413,-1.8283;-.1483,-3.6152,.6737;.0017,-5.2457,-4.7438;-.2319,-4.9871,-3.7075;-.8417,-4.297,-1.0908;.7892,-4.5812,-2.8501;-1.5504,-5.0733,-3.2567;-1.8562,-4.7226,-1.9441;.4961,-4.2508,-1.5254;1.8245,-4.5041,-3.1912;-2.3468,-5.385,-3.9363;-2.8948,-4.7583,-1.6064;-1.0359,-3.8537,.231;-2.1772,-3.6443,.875;-3.0651,-4.1005,.4346;-2.1756,-3.5209,2.3429;-2.2396,-3.3591,5.1421;-3.375,-3.7224,3.0414;-1.0082,-3.2457,3.0702;-1.0369,-3.1655,4.4595;-3.4062,-3.6433,4.4309;-4.2897,-3.9509,2.4889;-.0457,-3.118,2.5696;-.1062,-2.9717,5.0017;-4.3477,-3.8101,4.9621;-2.2619,-3.3047,6.2341;1.4127,-3.8895,-.6164;2.1736,-3.3833,-1.0639;.5224,.2364,-4.7151;-3.0833,-1.7077,.0326;-2.9052,-.9631,1.1976;-1.845,-.3107,1.5325;-.357,.5395,1.2344;-.4339,1.4607,-.3801;.9769,-.7383,1.3884;-.3094,1.7108,2.6951;-3.878,-.959,2.0979;-3.6454,-.355,3.3606;-.2086,.7781,-1.217;.3515,2.2402,-.3711;-1.4084,1.958,-.5286;1.0037,-1.1178,2.4233;1.9539,-.2819,1.1552;.8416,-1.5676,.6755;-.375,1.1592,3.6496;.6428,2.2715,2.6966;-1.1313,2.4471,2.6601;-2.7819,-.8158,3.8669;-4.5585,-.5335,3.944;-3.4748,.728,3.2483;4.83,-.6866,.9992;4.4274,-2.0215,.8657;3.7766,-2.6713,1.9073;3.545,-1.973,3.0887;3.999,-.6712,3.2789;4.6498,-.0349,2.2266;4.5494,-2.5242,-.0952;3.3983,-3.6873,1.7877;2.6833,-2.5791,4.109;3.7984,-.1575,4.2198;4.974,1.0036,2.3378;-.7943,.4574,-4.2899;-1.7748,-.5091,-4.4683;-1.4284,-1.7002,-5.096;-.142,-1.9325,-5.573;.8319,-.9628,-5.3702;-1.038,1.3808,-3.7582;-2.7932,-.3623,-4.1078;-2.4422,-2.7465,-5.2399;.0878,-2.8725,-6.0758;1.8538,-1.1491,-5.7048;2.3369,-1.885,5.045;2.3238,-3.726,3.9435;-2.2192,-3.6474,-6.0201;-3.4455,-2.6596,-4.5604;7.0656,1.1728,-1.485;6.1075,1.558,-2.4674;8.4354,1.4989,-1.682;8.8488,2.1572,-2.8144;9.1597,1.2046,-.9161;9.906,2.3969,-2.9579;6.5713,2.2197,-3.6387;7.9038,2.5103,-3.8074;5.8521,2.4882,-4.4159;8.2378,3.0115,-4.7198;3.4024,3.1535,-3.3497;2.29,3.5596,-4.1442;4.2102,4.1693,-2.7642;3.9633,5.5001,-3.0035;5.0365,3.8857,-2.1105;4.6013,6.259,-2.5423;2.0684,4.9436,-4.385;2.8898,5.8969,-3.8358;1.2193,5.2362,-5.0104;2.7088,6.9587,-4.0257;-4.4834,-2.1814,-.2854;-4.4578,-2.972,-1.0552;-5.0115,-2.565,.6026;-5.0969,-1.3587,-.6992;-2.1817,-1.408,-1.1387;-2.3187,-.3663,-1.4823;-1.1061,-1.5339,-.9378;-2.4287,-2.0589,-1.9931;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650394304186</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002189672535 0.000316192674 0.021836312434 0.005333039342</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030646103 -0.000646534 0.000051690 0.000122759 0.000186555 0.000246727 0.000370375 0.000414071 0.000577717 0.000796083 0.000940330 0.001054806 0.001280708 0.001337426 0.001368741 0.001424687 0.001639615 0.001813108 0.001834946 0.001971351 0.002137786 0.002492882 0.002593421 0.002714580 0.002865806 0.002932707 0.003145170 0.003463772 0.003771194 0.003955563 0.004447595 0.004748082 0.004809808 0.005099507 0.006019774 0.006078985 0.006208573 0.006626599 0.006874905 0.007621147 0.008102472 0.008208364 0.009265234 0.009565010 0.010005391 0.010713876 0.011050434 0.011478260 0.011667589 0.012256145 0.012905615 0.013200774 0.014013056 0.014450830 0.015077084 0.015407886 0.015701196 0.016235630 0.016873524 0.017480788 0.017792161 0.018109404 0.019406494 0.019539597 0.019982872 0.020808857 0.021211910 0.021418730 0.022465036 0.023132611 0.025189058 0.025999214 0.026776464 0.026997178 0.027464067 0.029276006 0.029512484 0.031427249 0.033288828 0.033500203 0.033910604 0.035818244 0.036861101 0.037636323 0.039618219 0.039982849 0.040778817 0.042282833 0.044301952 0.045107061 0.045443558 0.046947340 0.047713710 0.049207067 0.050330190 0.050812622 0.051045375 0.051259268 0.052478810 0.052598861 0.052876571 0.053042318 0.054712851 0.054865554 0.055894255 0.056232300 0.056498269 0.056593765 0.057039653 0.058438003 0.060328569 0.060829918 0.061624843 0.062119698 0.063205256 0.064405330 0.065134441 0.065826586 0.066397956 0.067849014 0.068960072 0.070242168 0.072697423 0.074463779 0.074541485 0.076191831 0.078089600 0.083620664 0.085347092 0.086969505 0.087270301 0.088053229 0.090417187 0.090946077 0.092997880 0.094601432 0.095328633 0.096393848 0.097382951 0.097911091 0.098881883 0.099957537 0.100333647 0.102421337 0.103054573 0.103373654 0.103581417 0.104187646 0.105765247 0.106884148 0.107401759 0.109612377 0.110724101 0.111877523 0.112544333 0.114861027 0.115542673 0.116311990 0.118532027 0.120177073 0.120965849 0.122725856 0.123744215 0.124741599 0.125642859 0.126270315 0.127025581 0.131859538 0.135025481 0.135745309 0.142736179 0.143557123 0.146994819 0.147311103 0.149678921 0.152426251 0.154762671 0.156152913 0.156699766 0.161519978 0.161828230 0.173443277 0.174029783 0.179822939 0.184125208 0.185347159 0.189397154 0.190241768 0.194009228 0.194114373 0.198342213 0.200140110 0.205197680 0.206895329 0.207247652 0.210063927 0.214169189 0.216409730 0.217658617 0.218368926 0.220688769 0.225172717 0.226227064 0.232030430 0.235021389 0.235447556 0.235907513 0.244569382 0.255967479 0.257234806 0.263499433 0.269824018 0.280341833 0.282892711 0.286208210 0.291560459 0.296698663 0.304326305 0.305708499 0.307273852 0.314028443 0.316645616 0.317340009 0.322081409 0.329697453 0.332765738 0.351770670 0.352058956 0.354858590 0.355759682 0.360041005 0.362777744 0.363750632 0.384320573 0.386060756 0.391886026 0.410657920 0.425443153 0.430676523 0.462063779 0.468647923 0.478203274 0.483587883 0.484176587 0.487595463 0.491263625 0.509442938 0.515244666 0.535195593 0.566350242 0.573181740 0.592250054 0.593628018 0.606415586 0.607974505 0.644663971 0.646782046 0.648972309 0.674267302 0.677776344 0.685451009 0.691560937 0.693503669 0.699888629 0.704401540 0.717287998 0.741244836 0.751229492 0.759004700 0.768923143 0.772578481 0.778777552 0.810831969 0.814829170 0.819250528 0.821636543 0.823447475 0.831492058 0.834008096 0.835906771 0.842099437 0.845673211 0.847411005 0.849326541 0.858960964 0.865885459 0.866595130 0.873874806 0.883608396 0.884746253 0.889590841 0.898398187 0.900811357 0.904035468 0.923394028 0.926345098 0.934398125 0.936157874 0.965843685 0.975820419 0.986034256 1.001141788 1.018352609 1.027973876 1.041695397 1.050763303 1.057446914 1.068596712 1.086600886 1.088645440 1.104304883 1.106383551 1.112317524 1.123462984 1.124572954 1.135769836 1.143672153 1.174294289 1.178583025 1.181050209 1.186491218 1.191254320 1.196165716 1.224383401 1.228249561 1.274821852 1.301579127 1.319445476 1.328111103 1.332848417 1.335437468 1.336199258 1.342025762 1.343030452 1.344927455 1.359019941 1.378658598 1.382895630 1.384255519 1.415439166 1.419910906 1.436376344 1.551474620 1.681398074 1.776002284</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">218</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33100284" y3="0.07067898" z3="-0.18514738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37569506" y3="0.18788519" z3="0.42948928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63886776" y3="0.45941737" z3="-0.33273217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72688595" y3="1.24485535" z3="-2.26325306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38223684" y3="0.45119472" z3="-1.18132237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73169003" y3="0.84616593" z3="-3.66710645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63649493" y3="1.75163041" z3="-3.14453227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39188749" y3="2.5854053" z3="-4.64236655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56738448" y3="1.24622494" z3="-4.38731385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51557853" y3="2.91705995" z3="-5.20795449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9244994" y3="-0.48241389" z3="-3.43560843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09110929" y3="0.06480155" z3="-0.99936217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3966442" y3="-1.08577487" z3="-1.99290652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92453554" y3="-0.95470492" z3="-1.82529124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09939136" y3="-2.40860683" z3="-1.82756845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14982622" y3="-3.61717012" z3="0.67462025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00298574" y3="-5.23892588" z3="-4.74553251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23558419" y3="-4.98315976" z3="-3.70827767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84374708" y3="-4.29908757" z3="-1.08973057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78552074" y3="-4.57526553" z3="-2.85201154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5533471" y3="-5.07421702" z3="-3.25551756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85863267" y3="-4.72622985" z3="-1.942014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49357162" y3="-4.24832778" z3="-1.52627845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81948513" y3="-4.49329856" z3="-3.19486991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34875485" y3="-5.38844193" z3="-3.9342526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89657649" y3="-4.76564098" z3="-1.60260466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03721543" y3="-3.85776505" z3="0.23280539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17856106" y3="-3.64962063" z3="0.87721131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06555201" y3="-4.10788635" z3="0.43791632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17559127" y3="-3.52677344" z3="2.34543523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23847475" y3="-3.36346726" z3="5.14461792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37408852" y3="-3.73208894" z3="3.0449125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00801361" y3="-3.24725876" z3="3.07185224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03734612" y3="-3.16466932" z3="4.46081208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40425459" y3="-3.65331278" z3="4.43445398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2900591" y3="-3.96224994" z3="2.49291917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04637614" y3="-3.1151521" z3="2.57063387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10918623" y3="-2.96305375" z3="5.00174546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34361166" y3="-3.8257796" z3="4.96632827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26123788" y3="-3.30719893" z3="6.23639643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40960684" y3="-3.8851985" z3="-0.61787141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17002085" y3="-3.37809012" z3="-1.06535689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52543348" y3="0.24086595" z3="-4.71790373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08631298" y3="-1.71496341" z3="0.03515617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90788191" y3="-0.97098516" z3="1.20094457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84676758" y3="-0.32053842" z3="1.53608338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36298385" y3="0.53818238" z3="1.23803652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44346943" y3="1.458942" z3="-0.37613245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97692887" y3="-0.73261554" z3="1.39134205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32301273" y3="1.7094841" z3="2.69931819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88064092" y3="-0.96689212" z3="2.10124738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64769556" y3="-0.36346369" z3="3.36408098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21787811" y3="0.77677149" z3="-1.2137406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33891923" y3="2.24025511" z3="-0.36771008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4193345" y3="1.95530306" z3="-0.52311524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00643882" y3="-1.1105071" z3="2.42654313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95215467" y3="-0.27327453" z3="1.15623828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84404321" y3="-1.56346325" z3="0.68030561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.3807313" y3="1.15628325" z3="3.65354134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.62324296" y3="2.28060855" z3="2.69927185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.15313717" y3="2.43746057" z3="2.66711629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78568242" y3="-0.8264035" z3="3.87073816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56182832" y3="-0.53976378" z3="3.94643429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47389751" y3="0.71946672" z3="3.25228509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82946454" y3="-0.68493237" z3="0.99788007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42578261" y3="-2.01925193" z3="0.86381417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77510385" y3="-2.66938529" z3="1.90527708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54458696" y3="-1.97189006" z3="3.08724682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00027029" y3="-0.67085333" z3="3.27839859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6510487" y3="-0.03430791" z3="2.22621306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54718424" y3="-2.5214664" z3="-0.09727291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39571089" y3="-3.68484045" z3="1.78483418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68149359" y3="-2.577737" z3="4.10637501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.80069448" y3="-0.15782822" z3="4.21982615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.97667388" y3="1.00350996" z3="2.33828399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78992995" y3="0.46467191" z3="-4.2894765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7725618" y3="-0.50081556" z3="-4.46495772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42904638" y3="-1.69332375" z3="-5.09019096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14384337" y3="-1.92793007" z3="-5.56948125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83172678" y3="-0.95996912" z3="-5.37323313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03113154" y3="1.38927718" z3="-3.7588736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79043324" y3="-0.35230996" z3="-4.10296645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44491927" y3="-2.73896207" z3="-5.23096512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08239616" y3="-2.86898152" z3="-6.07014242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8523608" y3="-1.14856385" z3="-5.71001227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33157855" y3="-1.88209637" z3="5.03988323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32356223" y3="-3.72568004" z3="3.94186159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22531837" y3="-3.64090579" z3="-6.01085347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44669229" y3="-2.65057391" z3="-4.54887617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06789274" y3="1.17420477" z3="-1.4840775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11116395" y3="1.55748463" z3="-2.46865263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43784314" y3="1.5003104" z3="-1.67912303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85293842" y3="2.15679526" z3="-2.81162127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16078144" y3="1.20668505" z3="-0.91177297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91036001" y3="2.39685476" z3="-2.95355577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5768979" y3="2.21761749" z3="-3.63992945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90962931" y3="2.50877029" z3="-3.80661095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85898524" y3="2.4851245" z3="-4.41871103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2452027" y3="3.01103612" z3="-4.71876761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41023354" y3="3.15414035" z3="-3.35767426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.299771" y3="3.56138192" z3="-4.15451158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21845175" y3="4.16964582" z3="-2.77239238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97400122" y3="5.50066433" z3="-3.01423882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04268752" y3="3.88623304" z3="-2.11600796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61120303" y3="6.26011954" z3="-2.55153243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08120912" y3="4.94533336" z3="-4.39855361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90329321" y3="5.89782004" z3="-3.84985889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23387462" y3="5.23822194" z3="-5.02628453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72472248" y3="6.95935244" z3="-4.0423757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48573188" y3="-2.18863553" z3="-0.28426203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4580486" y3="-2.97626779" z3="-1.0557693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01346962" y3="-2.57518459" z3="0.60186885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09984881" y3="-1.36538041" z3="-0.69649945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18587215" y3="-1.41281435" z3="-1.13618082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32232858" y3="-0.37025534" z3="-1.47905384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10781168" y3="-1.54129859" z3="-0.93531199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4261232" y3="-2.06338842" z3="-1.98861794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.331,.0707,-.1851;7.3757,.1879,.4295;6.6389,.4594,-.3327;4.7269,1.2449,-2.2633;4.3822,.4512,-1.1813;2.7317,.8462,-3.6671;3.6365,1.7516,-3.1445;1.3919,2.5854,-4.6424;1.5674,1.2462,-4.3873;.5156,2.9171,-5.208;2.9245,-.4824,-3.4356;3.0911,.0648,-.9994;2.3966,-1.0858,-1.9929;.9245,-.9547,-1.8253;3.0994,-2.4086,-1.8276;-.1498,-3.6172,.6746;-.003,-5.2389,-4.7455;-.2356,-4.9832,-3.7083;-.8437,-4.2991,-1.0897;.7855,-4.5753,-2.852;-1.5533,-5.0742,-3.2555;-1.8586,-4.7262,-1.942;.4936,-4.2483,-1.5263;1.8195,-4.4933,-3.1949;-2.3488,-5.3884,-3.9343;-2.8966,-4.7656,-1.6026;-1.0372,-3.8578,.2328;-2.1786,-3.6496,.8772;-3.0656,-4.1079,.4379;-2.1756,-3.5268,2.3454;-2.2385,-3.3635,5.1446;-3.3741,-3.7321,3.0449;-1.008,-3.2473,3.0719;-1.0373,-3.1647,4.4608;-3.4043,-3.6533,4.4345;-4.2901,-3.9622,2.4929;-.0464,-3.1152,2.5706;-.1092,-2.9631,5.0017;-4.3436,-3.8258,4.9663;-2.2612,-3.3072,6.2364;1.4096,-3.8852,-.6179;2.17,-3.3781,-1.0654;.5254,.2409,-4.7179;-3.0863,-1.715,.0352;-2.9079,-.971,1.2009;-1.8468,-.3205,1.5361;-.363,.5382,1.238;-.4435,1.4589,-.3761;.9769,-.7326,1.3913;-.323,1.7095,2.6993;-3.8806,-.9669,2.1012;-3.6477,-.3635,3.3641;-.2179,.7768,-1.2137;.3389,2.2403,-.3677;-1.4193,1.9553,-.5231;1.0064,-1.1105,2.4265;1.9522,-.2733,1.1562;.844,-1.5635,.6803;-.3807,1.1563,3.6535;.6232,2.2806,2.6993;-1.1531,2.4375,2.6671;-2.7857,-.8264,3.8707;-4.5618,-.5398,3.9464;-3.4739,.7195,3.2523;4.8295,-.6849,.9979;4.4258,-2.0193,.8638;3.7751,-2.6694,1.9053;3.5446,-1.9719,3.0872;4.0003,-.6709,3.2784;4.651,-.0343,2.2262;4.5472,-2.5215,-.0973;3.3957,-3.6848,1.7848;2.6815,-2.5777,4.1064;3.8007,-.1578,4.2198;4.9767,1.0035,2.3383;-.7899,.4647,-4.2895;-1.7726,-.5008,-4.465;-1.429,-1.6933,-5.0902;-.1438,-1.9279,-5.5695;.8317,-.96,-5.3732;-1.0311,1.3893,-3.7589;-2.7904,-.3523,-4.103;-2.4449,-2.739,-5.231;.0824,-2.869,-6.0701;1.8524,-1.1486,-5.71;2.3316,-1.8821,5.0399;2.3236,-3.7257,3.9419;-2.2253,-3.6409,-6.0109;-3.4467,-2.6506,-4.5489;7.0679,1.1742,-1.4841;6.1112,1.5575,-2.4687;8.4378,1.5003,-1.6791;8.8529,2.1568,-2.8116;9.1608,1.2067,-.9118;9.9104,2.3969,-2.9536;6.5769,2.2176,-3.6399;7.9096,2.5088,-3.8066;5.859,2.4851,-4.4187;8.2452,3.011,-4.7188;3.4102,3.1541,-3.3577;2.2998,3.5614,-4.1545;4.2185,4.1696,-2.7724;3.974,5.5007,-3.0142;5.0427,3.8862,-2.116;4.6112,6.2601,-2.5515;2.0812,4.9453,-4.3986;2.9033,5.8978,-3.8499;1.2339,5.2382,-5.0263;2.7247,6.9594,-4.0424;-4.4857,-2.1886,-.2843;-4.458,-2.9763,-1.0558;-5.0135,-2.5752,.6019;-5.0998,-1.3654,-.6965;-2.1859,-1.4128,-1.1362;-2.3223,-.3703,-1.4791;-1.1078,-1.5413,-.9353;-2.4261,-2.0634,-1.9886;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650401449599</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001888409449 0.000293503139 0.027435903761 0.005335367722</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030646096 -0.000550365 0.000056222 0.000105567 0.000187427 0.000232207 0.000384249 0.000414076 0.000578731 0.000796481 0.000940465 0.001057691 0.001280870 0.001343558 0.001370463 0.001424129 0.001641183 0.001813903 0.001834819 0.001971398 0.002142011 0.002493015 0.002598418 0.002721371 0.002865982 0.002932000 0.003145792 0.003463593 0.003776003 0.003955665 0.004449361 0.004748153 0.004809874 0.005099533 0.006027000 0.006084672 0.006210648 0.006627471 0.006881389 0.007621441 0.008103731 0.008212250 0.009265644 0.009566975 0.010007733 0.010713875 0.011052589 0.011481613 0.011676117 0.012261538 0.012912715 0.013201649 0.014016200 0.014468944 0.015091055 0.015415854 0.015704826 0.016239768 0.016883667 0.017481290 0.017884511 0.018110502 0.019406357 0.019542874 0.019986088 0.020809166 0.021213546 0.021419971 0.022478945 0.023133379 0.025190404 0.026007943 0.026779680 0.026999766 0.027467681 0.029280860 0.029512654 0.031427722 0.033289029 0.033500387 0.033910562 0.035818058 0.036861339 0.037636060 0.039618228 0.039983305 0.040778945 0.042283019 0.044302363 0.045119979 0.045444106 0.046952969 0.047718393 0.049207157 0.050335232 0.050815127 0.051045397 0.051259238 0.052478864 0.052601905 0.052877422 0.053042987 0.054713781 0.054866846 0.055899019 0.056232261 0.056498330 0.056594106 0.057042639 0.058441003 0.060328659 0.060831588 0.061627266 0.062121481 0.063213000 0.064405368 0.065143261 0.065832777 0.066414975 0.067849667 0.068960748 0.070242246 0.072698479 0.074464850 0.074553598 0.076192511 0.078089648 0.083621163 0.085348176 0.086972473 0.087272340 0.088055253 0.090417216 0.090947379 0.092997966 0.094601516 0.095347460 0.096395995 0.097383218 0.097913205 0.098882010 0.099960447 0.100341245 0.102424791 0.103077167 0.103374895 0.103609583 0.104187242 0.105777227 0.106888884 0.107402748 0.109612178 0.110747194 0.111880734 0.112545354 0.114861130 0.115586519 0.116312545 0.118579269 0.120232424 0.120983987 0.122765907 0.123942379 0.124828743 0.125682219 0.126271340 0.127033483 0.131888198 0.135027141 0.135745727 0.142738060 0.143557251 0.147003554 0.147317609 0.149681891 0.152440442 0.154767294 0.156152759 0.156705101 0.161525630 0.161833391 0.173443305 0.174033511 0.179824248 0.184127253 0.185349105 0.189415994 0.190255040 0.194020118 0.194126471 0.198342724 0.200140398 0.205212196 0.206895466 0.207247891 0.210069286 0.214219338 0.216413562 0.217681732 0.218379994 0.220688799 0.225172778 0.226227197 0.232038887 0.235021583 0.235447554 0.235909667 0.244569399 0.255973524 0.257235005 0.263506273 0.269826052 0.280341822 0.282896687 0.286215513 0.291561531 0.296700906 0.304328334 0.305711812 0.307275778 0.314028457 0.316651309 0.317345252 0.322086638 0.329701422 0.332771691 0.351771833 0.352067240 0.354863443 0.355760240 0.360061762 0.362777742 0.363795855 0.384320665 0.386068251 0.391898787 0.410663878 0.425454637 0.430722827 0.462100317 0.468648893 0.478204081 0.483590311 0.484190550 0.487603303 0.491274523 0.509472344 0.515248002 0.535199003 0.566351157 0.573207851 0.592259290 0.593632164 0.606415672 0.607979924 0.644663989 0.646798113 0.648974219 0.674268241 0.677776598 0.685451104 0.691562605 0.693504546 0.699891242 0.704402459 0.717288998 0.741244944 0.751229655 0.759014718 0.768923524 0.772582599 0.778777599 0.810846432 0.814964763 0.819313093 0.821636851 0.823453887 0.831494385 0.834107750 0.835925495 0.842103549 0.845675449 0.847430925 0.849364751 0.858962155 0.865885960 0.866598518 0.873881934 0.883656121 0.884825606 0.889593539 0.898725060 0.900812352 0.904036602 0.923395310 0.926663000 0.934540008 0.936306168 0.965856586 0.975823753 0.986039139 1.001142226 1.018356019 1.027977189 1.041700078 1.050765827 1.057456581 1.068616915 1.086602948 1.088645728 1.104307386 1.106393905 1.112317650 1.123549062 1.124580834 1.135782182 1.143686609 1.174301442 1.178594201 1.181054615 1.186498521 1.191256278 1.196165725 1.224386214 1.228254547 1.274825027 1.301620855 1.319454781 1.328112644 1.332866898 1.335449550 1.336207608 1.342053200 1.343030717 1.344931528 1.359021709 1.378660953 1.382895672 1.384258956 1.415440698 1.419919787 1.436377410 1.551474790 1.681421436 1.776011029</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">219</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33308295" y3="0.06930849" z3="-0.18666177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37740766" y3="0.18346876" z3="0.42780441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64098384" y3="0.4561698" z3="-0.33429021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73003532" y3="1.24537089" z3="-2.26420143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38463372" y3="0.45100175" z3="-1.18272806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7343212" y3="0.84933263" z3="-3.66843839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64002387" y3="1.75365305" z3="-3.1451916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39782994" y3="2.5896528" z3="-4.64530067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57074988" y3="1.25097745" z3="-4.38902006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52221199" y3="2.92270501" z3="-5.21117998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92601125" y3="-0.48006071" z3="-3.43796329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09298779" y3="0.06479942" z3="-1.00088929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39644132" y3="-1.08353516" z3="-1.99566854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92464665" y3="-0.94976342" z3="-1.82743352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09673285" y3="-2.40799015" z3="-1.83196005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14915508" y3="-3.62196746" z3="0.67738512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00970515" y3="-5.23399443" z3="-4.74610851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24066911" y3="-4.98104225" z3="-3.70777047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84488662" y3="-4.30357249" z3="-1.08670659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78126615" y3="-4.57161661" z3="-2.85312178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55689878" y3="-5.07780731" z3="-3.25200729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8598665" y3="-4.73373474" z3="-1.93699913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4910345" y3="-4.24737643" z3="-1.52625635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8142346" y3="-4.48538825" z3="-3.19818846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35428995" y3="-5.39149373" z3="-3.92977229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89646321" y3="-4.7785746" z3="-1.59504986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0371676" y3="-3.86286714" z3="0.23624108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17810747" y3="-3.654265" z3="0.88117809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0656599" y3="-4.11385743" z3="0.44345405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17444009" y3="-3.52777834" z3="2.34880048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23271168" y3="-3.36228561" z3="5.1479241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37052043" y3="-3.73818926" z3="3.05026843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00794884" y3="-3.24007565" z3="3.07276152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03381688" y3="-3.15816966" z3="4.4621331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39902071" y3="-3.6572548" z3="4.43972546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2844507" y3="-3.97598438" z3="2.50019252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04863447" y3="-3.10217588" z3="2.56937726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10340657" y3="-2.95540987" z3="5.00216255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33753227" y3="-3.83199467" z3="4.97347181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25258367" y3="-3.30665783" z3="6.24005802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40810215" y3="-3.88247734" z3="-0.61941257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16786538" y3="-3.37551129" z3="-1.06851946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52749891" y3="0.24584816" z3="-4.72010257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08675627" y3="-1.72233169" z3="0.03415258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91075347" y3="-0.97806612" z3="1.19968632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85012034" y3="-0.32750364" z3="1.53602994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37203424" y3="0.54055538" z3="1.23796751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4570025" y3="1.45775731" z3="-0.378112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9755302" y3="-0.72291989" z3="1.39330352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34147693" y3="1.71542485" z3="2.69685507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88455048" y3="-0.97454747" z3="2.09890691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65414841" y3="-0.36919268" z3="3.36127762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22460449" y3="0.77575345" z3="-1.21360917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32106039" y3="2.24432572" z3="-0.36994834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43569159" y3="1.94623053" z3="-0.52830056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00865225" y3="-1.09824835" z3="2.42947219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94816573" y3="-0.25976521" z3="1.15524583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84467548" y3="-1.55675403" z3="0.6846485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39139397" y3="1.16406278" z3="3.65252844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59773486" y3="2.29824158" z3="2.69388632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18057307" y3="2.43287601" z3="2.66403351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79186222" y3="-0.82913809" z3="3.86971273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56831495" y3="-0.54652858" z3="3.94327519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48307221" y3="0.71355288" z3="3.24784789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83101741" y3="-0.68645472" z3="0.99596833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42145895" y3="-2.01897275" z3="0.86006382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77034847" y3="-2.66845791" z3="1.90158959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54534062" y3="-1.97215817" z3="3.08545047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00644398" y3="-0.67322014" z3="3.27791122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.65762578" y3="-0.03733048" z3="2.22562078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5382475" y3="-2.51974568" z3="-0.10264665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38651638" y3="-3.68224041" z3="1.77991682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68341278" y3="-2.57691575" z3="4.1061806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81096492" y3="-0.16107979" z3="4.22058668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.98742295" y3="0.99902683" z3="2.33866529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78685174" y3="0.47063846" z3="-4.28962402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77015245" y3="-0.49456404" z3="-4.46138954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4289232" y3="-1.68780915" z3="-5.08827543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14532346" y3="-1.92359542" z3="-5.57055013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83158026" y3="-0.95528836" z3="-5.37419265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02611547" y3="1.39562524" z3="-3.75872983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78642988" y3="-0.34496021" z3="-4.09627546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44524943" y3="-2.7328592" z3="-5.22425661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08029403" y3="-2.86514266" z3="-6.07216146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85160599" y3="-1.14451606" z3="-5.71311406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33702761" y3="-1.88136164" z3="5.04125989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32363115" y3="-3.72394627" z3="3.94221975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22835285" y3="-3.63536902" z3="-6.00439901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44455441" y3="-2.64348641" z3="-4.5389521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07065754" y3="1.17130518" z3="-1.48521851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11454702" y3="1.5563646" z3="-2.46961846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44095783" y3="1.49689018" z3="-1.67956427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85695231" y3="2.15369278" z3="-2.81172043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16351196" y3="1.20334385" z3="-0.91174562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91462091" y3="2.3939119" z3="-2.95300652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58111293" y3="2.2160694" z3="-3.64076976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91402236" y3="2.50565736" z3="-3.80714532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86374723" y3="2.48412686" z3="-4.41984983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25008996" y3="3.00583828" z3="-4.7194775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4158865" y3="3.15609168" z3="-3.35867716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30684483" y3="3.56430057" z3="-4.15693528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22481345" y3="4.17032763" z3="-2.772359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9821222" y3="5.50156331" z3="-3.01381683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04824402" y3="3.88545531" z3="-2.11563182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6205034" y3="6.25922608" z3="-2.55119841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09029126" y3="4.94842677" z3="-4.40079053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91242917" y3="5.90025492" z3="-3.85001545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2438549" y3="5.24260843" z3="-5.02909162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73472992" y3="6.96220751" z3="-4.04173409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48543388" y3="-2.19853139" z3="-0.28558931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45763887" y3="-2.98819469" z3="-1.05627859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01330031" y3="-2.58403126" z3="0.60196372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.100231" y3="-1.37666873" z3="-0.69899948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18377125" y3="-1.42047949" z3="-1.1354514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32248025" y3="-0.37876887" z3="-1.47867356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10803069" y3="-1.5441512" z3="-0.93180511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42700597" y3="-2.07118778" z3="-1.99056118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3331,.0693,-.1867;7.3774,.1835,.4278;6.641,.4562,-.3343;4.73,1.2454,-2.2642;4.3846,.451,-1.1827;2.7343,.8493,-3.6684;3.64,1.7537,-3.1452;1.3978,2.5897,-4.6453;1.5707,1.251,-4.389;.5222,2.9227,-5.2112;2.926,-.4801,-3.438;3.093,.0648,-1.0009;2.3964,-1.0835,-1.9957;.9246,-.9498,-1.8274;3.0967,-2.408,-1.832;-.1492,-3.622,.6774;-.0097,-5.234,-4.7461;-.2407,-4.981,-3.7078;-.8449,-4.3036,-1.0867;.7813,-4.5716,-2.8531;-1.5569,-5.0778,-3.252;-1.8599,-4.7337,-1.937;.491,-4.2474,-1.5263;1.8142,-4.4854,-3.1982;-2.3543,-5.3915,-3.9298;-2.8965,-4.7786,-1.595;-1.0372,-3.8629,.2362;-2.1781,-3.6543,.8812;-3.0657,-4.1139,.4435;-2.1744,-3.5278,2.3488;-2.2327,-3.3623,5.1479;-3.3705,-3.7382,3.0503;-1.0079,-3.2401,3.0728;-1.0338,-3.1582,4.4621;-3.399,-3.6573,4.4397;-4.2845,-3.976,2.5002;-.0486,-3.1022,2.5694;-.1034,-2.9554,5.0022;-4.3375,-3.832,4.9735;-2.2526,-3.3067,6.2401;1.4081,-3.8825,-.6194;2.1679,-3.3755,-1.0685;.5275,.2458,-4.7201;-3.0868,-1.7223,.0342;-2.9108,-.9781,1.1997;-1.8501,-.3275,1.536;-.372,.5406,1.238;-.457,1.4578,-.3781;.9755,-.7229,1.3933;-.3415,1.7154,2.6969;-3.8846,-.9745,2.0989;-3.6541,-.3692,3.3613;-.2246,.7758,-1.2136;.3211,2.2443,-.3699;-1.4357,1.9462,-.5283;1.0087,-1.0982,2.4295;1.9482,-.2598,1.1552;.8447,-1.5568,.6846;-.3914,1.1641,3.6525;.5977,2.2982,2.6939;-1.1806,2.4329,2.664;-2.7919,-.8291,3.8697;-4.5683,-.5465,3.9433;-3.4831,.7136,3.2478;4.831,-.6865,.996;4.4215,-2.019,.8601;3.7703,-2.6685,1.9016;3.5453,-1.9722,3.0855;4.0064,-.6732,3.2779;4.6576,-.0373,2.2256;4.5382,-2.5197,-.1026;3.3865,-3.6822,1.7799;2.6834,-2.5769,4.1062;3.811,-.1611,4.2206;4.9874,.999,2.3387;-.7869,.4706,-4.2896;-1.7702,-.4946,-4.4614;-1.4289,-1.6878,-5.0883;-.1453,-1.9236,-5.5706;.8316,-.9553,-5.3742;-1.0261,1.3956,-3.7587;-2.7864,-.345,-4.0963;-2.4452,-2.7329,-5.2243;.0803,-2.8651,-6.0722;1.8516,-1.1445,-5.7131;2.337,-1.8814,5.0413;2.3236,-3.7239,3.9422;-2.2284,-3.6354,-6.0044;-3.4446,-2.6435,-4.539;7.0707,1.1713,-1.4852;6.1145,1.5564,-2.4696;8.441,1.4969,-1.6796;8.857,2.1537,-2.8117;9.1635,1.2033,-.9117;9.9146,2.3939,-2.953;6.5811,2.2161,-3.6408;7.914,2.5057,-3.8071;5.8637,2.4841,-4.4198;8.2501,3.0058,-4.7195;3.4159,3.1561,-3.3587;2.3068,3.5643,-4.1569;4.2248,4.1703,-2.7724;3.9821,5.5016,-3.0138;5.0482,3.8855,-2.1156;4.6205,6.2592,-2.5512;2.0903,4.9484,-4.4008;2.9124,5.9003,-3.85;1.2439,5.2426,-5.0291;2.7347,6.9622,-4.0417;-4.4854,-2.1985,-.2856;-4.4576,-2.9882,-1.0563;-5.0133,-2.584,.602;-5.1002,-1.3767,-.699;-2.1838,-1.4205,-1.1355;-2.3225,-.3788,-1.4787;-1.108,-1.5442,-.9318;-2.427,-2.0712,-1.9906;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650410697994</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001545727905 0.000281168739 0.024115487951 0.005339303286</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030646279 -0.000412579 0.000071500 0.000080130 0.000205708 0.000232572 0.000390241 0.000414436 0.000578710 0.000797440 0.000940532 0.001057567 0.001280747 0.001346752 0.001370956 0.001424363 0.001641344 0.001814053 0.001834799 0.001971753 0.002142073 0.002493079 0.002602462 0.002721558 0.002868673 0.002933877 0.003146088 0.003463782 0.003782782 0.003955873 0.004449302 0.004748216 0.004810782 0.005099706 0.006031414 0.006089764 0.006212814 0.006628148 0.006894040 0.007623030 0.008103981 0.008218344 0.009265944 0.009567630 0.010008258 0.010713800 0.011059656 0.011482554 0.011687069 0.012273028 0.012915745 0.013202840 0.014019903 0.014490944 0.015100193 0.015426485 0.015710789 0.016245085 0.016896542 0.017481424 0.017966914 0.018111340 0.019406346 0.019546269 0.019990395 0.020809948 0.021214702 0.021422969 0.022495795 0.023134533 0.025191847 0.026018117 0.026783618 0.027000839 0.027477664 0.029285682 0.029512651 0.031427970 0.033289162 0.033500563 0.033910792 0.035818150 0.036862107 0.037637367 0.039618944 0.039984309 0.040779517 0.042285563 0.044302930 0.045139662 0.045444892 0.046956722 0.047721030 0.049207303 0.050341438 0.050819770 0.051046950 0.051259845 0.052478889 0.052605969 0.052878668 0.053044024 0.054714244 0.054870764 0.055901618 0.056232396 0.056498369 0.056595285 0.057046348 0.058443445 0.060328593 0.060832437 0.061632057 0.062123579 0.063225260 0.064405456 0.065153794 0.065841937 0.066426921 0.067849680 0.068960887 0.070242328 0.072700001 0.074466161 0.074574196 0.076193740 0.078090695 0.083621488 0.085352386 0.086973199 0.087273403 0.088059891 0.090417321 0.090948898 0.092997953 0.094601843 0.095366026 0.096397211 0.097383545 0.097913729 0.098882201 0.099962065 0.100347777 0.102426288 0.103098815 0.103374926 0.103641947 0.104192756 0.105793958 0.106894791 0.107403387 0.109612773 0.110770152 0.111882372 0.112546020 0.114861175 0.115622413 0.116313155 0.118609509 0.120268418 0.120995641 0.122787687 0.124081836 0.124924096 0.125721519 0.126273958 0.127038331 0.131913160 0.135029797 0.135746077 0.142739593 0.143557528 0.147009428 0.147327247 0.149683149 0.152452342 0.154768806 0.156152861 0.156708503 0.161532433 0.161838858 0.173445258 0.174034238 0.179824934 0.184136151 0.185353757 0.189433178 0.190266021 0.194023458 0.194143994 0.198342901 0.200140431 0.205224562 0.206895532 0.207249018 0.210079336 0.214262871 0.216415885 0.217709937 0.218388664 0.220688932 0.225172848 0.226227966 0.232053464 0.235026772 0.235448159 0.235910448 0.244569398 0.255978088 0.257235084 0.263519666 0.269827736 0.280342072 0.282903701 0.286229272 0.291562966 0.296701722 0.304329500 0.305715185 0.307276145 0.314028601 0.316659470 0.317352285 0.322087358 0.329703058 0.332779012 0.351776938 0.352083793 0.354865822 0.355760339 0.360073592 0.362777775 0.363868477 0.384322100 0.386077614 0.391911986 0.410669826 0.425475154 0.430755210 0.462151330 0.468650954 0.478204578 0.483598432 0.484204007 0.487609910 0.491289932 0.509490488 0.515251505 0.535203683 0.566351717 0.573244783 0.592266199 0.593643271 0.606415714 0.607990668 0.644664561 0.646825030 0.648984933 0.674268777 0.677777456 0.685455291 0.691562740 0.693505567 0.699892946 0.704403435 0.717288965 0.741245045 0.751229944 0.759020225 0.768932141 0.772590740 0.778777614 0.810859294 0.815054132 0.819378599 0.821637205 0.823455965 0.831498920 0.834234856 0.835949318 0.842109425 0.845676871 0.847445540 0.849390398 0.858962288 0.865886796 0.866599339 0.873887293 0.883708868 0.884926447 0.889594322 0.898956715 0.900813235 0.904037131 0.923395970 0.926870399 0.934673566 0.936441162 0.965879734 0.975832951 0.986041065 1.001142219 1.018358270 1.027977547 1.041705910 1.050767225 1.057466604 1.068633061 1.086603527 1.088647198 1.104309090 1.106396172 1.112319248 1.123605412 1.124581014 1.135802574 1.143709391 1.174315140 1.178617943 1.181056126 1.186500945 1.191262896 1.196168862 1.224400402 1.228263077 1.274824423 1.301674129 1.319467662 1.328114338 1.332891449 1.335464113 1.336208394 1.342096135 1.343032222 1.344936871 1.359021872 1.378662488 1.382895762 1.384263118 1.415445647 1.419942666 1.436378736 1.551474887 1.681449548 1.776020187</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">220</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33521592" y3="0.06447831" z3="-0.18991734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38028317" y3="0.17749702" z3="0.42434046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64373913" y3="0.45120494" z3="-0.33738061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73250983" y3="1.24243893" z3="-2.26628254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38685673" y3="0.44774743" z3="-1.18547643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73577668" y3="0.85049453" z3="-3.66999479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6427196" y3="1.75295934" z3="-3.14617046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39961884" y3="2.59398289" z3="-4.64239915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57240809" y3="1.25414849" z3="-4.38973752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52383696" y3="2.92857294" z3="-5.20709131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92519605" y3="-0.47885308" z3="-3.44032514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.095068" y3="0.06371535" z3="-1.00335435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39662317" y3="-1.08302529" z3="-1.9982074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92513434" y3="-0.9485686" z3="-1.82814311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09617127" y3="-2.40812295" z3="-1.83669214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1478105" y3="-3.62089187" z3="0.67752247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01602874" y3="-5.23058128" z3="-4.74697989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24500885" y3="-4.98000053" z3="-3.70764679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84432264" y3="-4.30736046" z3="-1.08430814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77803024" y3="-4.56934148" z3="-2.85486299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55994064" y3="-5.08063402" z3="-3.24894617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86062206" y3="-4.73886399" z3="-1.93276349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49060911" y3="-4.24800676" z3="-1.52672593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81014628" y3="-4.4807052" z3="-3.20249259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35655974" y3="-5.39696336" z3="-3.92510858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89688195" y3="-4.78507357" z3="-1.58827275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03509779" y3="-3.86641973" z3="0.23873755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17610465" y3="-3.65752627" z3="0.88406019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06258902" y3="-4.12087789" z3="0.44902155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17041196" y3="-3.52884719" z3="2.3519192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22825176" y3="-3.35423274" z3="5.15039182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36542929" y3="-3.74107601" z3="3.05511129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0034249" y3="-3.23639887" z3="3.07427934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03004605" y3="-3.14894389" z3="4.46297425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3930367" y3="-3.65670234" z3="4.44435359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28066548" y3="-3.98146192" z3="2.50629497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04395677" y3="-3.09795512" z3="2.56994631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10256553" y3="-2.93820833" z3="5.00132663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33001119" y3="-3.83400186" z3="4.97925146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24876136" y3="-3.29386793" z3="6.24195085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40847158" y3="-3.88151936" z3="-0.62151353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16750774" y3="-3.37497485" z3="-1.0720984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52853966" y3="0.25063784" z3="-4.72047941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08703961" y3="-1.7309167" z3="0.03339507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91323022" y3="-0.98398669" z3="1.19808746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85315961" y3="-0.3322618" z3="1.53408586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37964378" y3="0.54371296" z3="1.23519882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46676712" y3="1.45601161" z3="-0.38363728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97454552" y3="-0.71185064" z3="1.3952683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35978627" y3="1.72331735" z3="2.69015342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88810219" y3="-0.98003645" z3="2.09591602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66050841" y3="-0.37170854" z3="3.35747541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2277394" y3="0.77293976" z3="-1.2169428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30438117" y3="2.24881635" z3="-0.37522403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44900185" y3="1.93742145" z3="-0.53757329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01113583" y3="-1.08247432" z3="2.43293939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94474985" y3="-0.24544851" z3="1.15322117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84701992" y3="-1.54964975" z3="0.69091235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40713586" y3="1.17475712" z3="3.64765907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5744373" y3="2.3140099" z3="2.68703647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20468856" y3="2.43403146" z3="2.65311663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7982755" y3="-0.83025471" z3="3.86793738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.575617" y3="-0.54899601" z3="3.93784895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49010286" y3="0.71137054" z3="3.24244716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83259381" y3="-0.69017573" z3="0.99304348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41624442" y3="-2.02047179" z3="0.85683248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7654126" y3="-2.66814009" z3="1.89962518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54718426" y3="-1.97227962" z3="3.08500101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01507985" y3="-0.67580911" z3="3.27771372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66627196" y3="-0.04177761" z3="2.22427257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52833739" y3="-2.52072809" z3="-0.10648266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37719623" y3="-3.68009735" z3="1.77821008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68602969" y3="-2.57475742" z3="4.10767679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82538874" y3="-0.16403579" z3="4.22194449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00184728" y3="0.9927967" z3="2.33810832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7855675" y3="0.47511218" z3="-4.28876925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7689361" y3="-0.49023401" z3="-4.46023298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42773718" y3="-1.68346128" z3="-5.08514366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14431989" y3="-1.91825749" z3="-5.56947736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83212703" y3="-0.95035474" z3="-5.3770325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02469019" y3="1.40004788" z3="-3.75775443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78551856" y3="-0.34130415" z3="-4.09486878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44383975" y3="-2.72970701" z3="-5.22098866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08020505" y3="-2.85969287" z3="-6.07048443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85151442" y3="-1.13947142" z3="-5.71729772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34628303" y3="-1.87927263" z3="5.04502946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31959867" y3="-3.71984557" z3="3.94239883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22751958" y3="-3.63216586" z3="-6.00117554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44252088" y3="-2.64102548" z3="-4.5346625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07371928" y3="1.16650998" z3="-1.48799987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11732301" y3="1.55300301" z3="-2.47164961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44420722" y3="1.49020235" z3="-1.683123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86013642" y3="2.1479431" z3="-2.81468316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16683775" y3="1.19373227" z3="-0.91662378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91779642" y3="2.3854318" z3="-2.95689358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58384484" y3="2.21437954" z3="-3.64194631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91712991" y3="2.50350196" z3="-3.80862952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86615208" y3="2.48450924" z3="-4.42000521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25328798" y3="3.00631381" z3="-4.72013729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4188695" y3="3.15635996" z3="-3.35608283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30909413" y3="3.56733022" z3="-4.15194648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22846048" y3="4.16906706" z3="-2.76776974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98568894" y3="5.50104537" z3="-3.00545096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05232902" y3="3.88246859" z3="-2.11229441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62368216" y3="6.25826677" z3="-2.54017092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09237443" y3="4.95236133" z3="-4.39172393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91549357" y3="5.90208464" z3="-3.83984486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2455341" y3="5.24825768" z3="-5.01867976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73809331" y3="6.96442137" z3="-4.02883823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48441578" y3="-2.20912784" z3="-0.28841471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45244773" y3="-2.99693115" z3="-1.05952269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01265733" y3="-2.59717849" z3="0.59685474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.1002518" y3="-1.38803358" z3="-0.7021492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18452374" y3="-1.42718674" z3="-1.13615149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32340744" y3="-0.3852822" z3="-1.47966244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10695571" y3="-1.55180895" z3="-0.93203593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42180268" y3="-2.07854191" z3="-1.98938244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3352,.0645,-.1899;7.3803,.1775,.4243;6.6437,.4512,-.3374;4.7325,1.2424,-2.2663;4.3869,.4477,-1.1855;2.7358,.8505,-3.67;3.6427,1.753,-3.1462;1.3996,2.594,-4.6424;1.5724,1.2541,-4.3897;.5238,2.9286,-5.2071;2.9252,-.4789,-3.4403;3.0951,.0637,-1.0034;2.3966,-1.083,-1.9982;.9251,-.9486,-1.8281;3.0962,-2.4081,-1.8367;-.1478,-3.6209,.6775;-.016,-5.2306,-4.747;-.245,-4.98,-3.7076;-.8443,-4.3074,-1.0843;.778,-4.5693,-2.8549;-1.5599,-5.0806,-3.2489;-1.8606,-4.7389,-1.9328;.4906,-4.248,-1.5267;1.8101,-4.4807,-3.2025;-2.3566,-5.397,-3.9251;-2.8969,-4.7851,-1.5883;-1.0351,-3.8664,.2387;-2.1761,-3.6575,.8841;-3.0626,-4.1209,.449;-2.1704,-3.5288,2.3519;-2.2283,-3.3542,5.1504;-3.3654,-3.7411,3.0551;-1.0034,-3.2364,3.0743;-1.03,-3.1489,4.463;-3.393,-3.6567,4.4444;-4.2807,-3.9815,2.5063;-.044,-3.098,2.5699;-.1026,-2.9382,5.0013;-4.33,-3.834,4.9793;-2.2488,-3.2939,6.242;1.4085,-3.8815,-.6215;2.1675,-3.375,-1.0721;.5285,.2506,-4.7205;-3.087,-1.7309,.0334;-2.9132,-.984,1.1981;-1.8532,-.3323,1.5341;-.3796,.5437,1.2352;-.4668,1.456,-.3836;.9745,-.7119,1.3953;-.3598,1.7233,2.6902;-3.8881,-.98,2.0959;-3.6605,-.3717,3.3575;-.2277,.7729,-1.2169;.3044,2.2488,-.3752;-1.449,1.9374,-.5376;1.0111,-1.0825,2.4329;1.9447,-.2454,1.1532;.847,-1.5496,.6909;-.4071,1.1748,3.6477;.5744,2.314,2.687;-1.2047,2.434,2.6531;-2.7983,-.8303,3.8679;-4.5756,-.549,3.9378;-3.4901,.7114,3.2424;4.8326,-.6902,.993;4.4162,-2.0205,.8568;3.7654,-2.6681,1.8996;3.5472,-1.9723,3.085;4.0151,-.6758,3.2777;4.6663,-.0418,2.2243;4.5283,-2.5207,-.1065;3.3772,-3.6801,1.7782;2.686,-2.5748,4.1077;3.8254,-.164,4.2219;5.0018,.9928,2.3381;-.7856,.4751,-4.2888;-1.7689,-.4902,-4.4602;-1.4277,-1.6835,-5.0851;-.1443,-1.9183,-5.5695;.8321,-.9504,-5.377;-1.0247,1.4,-3.7578;-2.7855,-.3413,-4.0949;-2.4438,-2.7297,-5.221;.0802,-2.8597,-6.0705;1.8515,-1.1395,-5.7173;2.3463,-1.8793,5.045;2.3196,-3.7198,3.9424;-2.2275,-3.6322,-6.0012;-3.4425,-2.641,-4.5347;7.0737,1.1665,-1.488;6.1173,1.553,-2.4716;8.4442,1.4902,-1.6831;8.8601,2.1479,-2.8147;9.1668,1.1937,-.9166;9.9178,2.3854,-2.9569;6.5838,2.2144,-3.6419;7.9171,2.5035,-3.8086;5.8662,2.4845,-4.42;8.2533,3.0063,-4.7201;3.4189,3.1564,-3.3561;2.3091,3.5673,-4.1519;4.2285,4.1691,-2.7678;3.9857,5.501,-3.0055;5.0523,3.8825,-2.1123;4.6237,6.2583,-2.5402;2.0924,4.9524,-4.3917;2.9155,5.9021,-3.8398;1.2455,5.2483,-5.0187;2.7381,6.9644,-4.0288;-4.4844,-2.2091,-.2884;-4.4524,-2.9969,-1.0595;-5.0127,-2.5972,.5969;-5.1003,-1.388,-.7021;-2.1845,-1.4272,-1.1362;-2.3234,-.3853,-1.4797;-1.107,-1.5518,-.932;-2.4218,-2.0785,-1.9894;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417612618</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001310450899 0.000264961270 0.021239520727 0.005340793019</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030647840 -0.000772422 0.000032597 0.000142055 0.000217467 0.000314750 0.000394267 0.000428972 0.000584001 0.000801512 0.000938270 0.001060100 0.001280520 0.001343782 0.001379847 0.001422564 0.001603207 0.001810626 0.001834770 0.001953140 0.002142274 0.002442311 0.002610222 0.002708275 0.002858261 0.002925735 0.003149139 0.003472469 0.003781108 0.003953131 0.004442279 0.004738953 0.004807410 0.005091712 0.006043361 0.006075408 0.006207773 0.006618095 0.006921031 0.007631363 0.008103806 0.008226792 0.009262706 0.009562051 0.010008089 0.010696834 0.011022500 0.011448292 0.011723914 0.012228035 0.012919492 0.013147996 0.014020175 0.014525656 0.015114128 0.015445666 0.015717386 0.016242071 0.016917799 0.017483677 0.018102247 0.018111912 0.019408078 0.019553207 0.019986752 0.020805490 0.021215254 0.021428915 0.022529416 0.023137558 0.025163847 0.026044506 0.026773536 0.027005227 0.027517619 0.029291816 0.029515925 0.031422636 0.033291751 0.033499986 0.033912699 0.035816185 0.036864642 0.037644947 0.039610460 0.039984667 0.040784441 0.042289330 0.044294083 0.045092279 0.045455288 0.046963680 0.047721365 0.049208269 0.050344307 0.050827012 0.051059928 0.051262146 0.052478799 0.052615370 0.052881911 0.053044908 0.054712070 0.054883975 0.055900866 0.056233693 0.056498407 0.056599828 0.057049581 0.058445908 0.060324995 0.060830848 0.061644056 0.062125703 0.063244398 0.064407146 0.065158979 0.065865938 0.066431448 0.067846893 0.068962240 0.070240198 0.072704724 0.074465487 0.074619136 0.076199278 0.078107339 0.083623397 0.085362635 0.086975978 0.087275723 0.088075542 0.090416852 0.090952211 0.092998220 0.094602401 0.095366829 0.096396967 0.097387197 0.097913783 0.098881334 0.099964355 0.100351642 0.102426888 0.103129888 0.103375094 0.103680600 0.104211715 0.105809808 0.106903681 0.107400515 0.109617746 0.110786367 0.111889474 0.112546981 0.114859430 0.115650874 0.116311139 0.118627161 0.120300122 0.121015998 0.122808389 0.124176650 0.125076365 0.125839053 0.126274669 0.127042569 0.131945615 0.135031625 0.135744152 0.142739492 0.143556121 0.147010323 0.147341698 0.149683761 0.152480392 0.154772636 0.156169143 0.156705392 0.161543089 0.161846120 0.173460789 0.174033515 0.179827860 0.184161186 0.185366579 0.189459977 0.190283870 0.194023787 0.194177880 0.198344407 0.200140793 0.205220465 0.206895093 0.207250060 0.210101042 0.214339792 0.216420713 0.217762847 0.218416670 0.220689490 0.225179846 0.226231310 0.232075249 0.235041272 0.235449982 0.235909972 0.244570480 0.255986861 0.257236203 0.263541104 0.269830481 0.280343731 0.282919253 0.286253618 0.291566262 0.296701964 0.304328302 0.305716562 0.307275971 0.314040473 0.316666983 0.317361632 0.322094392 0.329709988 0.332787905 0.351785157 0.352111465 0.354868151 0.355760619 0.360082382 0.362779023 0.363950928 0.384335387 0.386069218 0.391923002 0.410666434 0.425506821 0.430811166 0.462182823 0.468651746 0.478210961 0.483603276 0.484199582 0.487602547 0.491341700 0.509495600 0.515252286 0.535206517 0.566349102 0.573305088 0.592292329 0.593669596 0.606415679 0.607971330 0.644661588 0.646840974 0.649028074 0.674272658 0.677781215 0.685465166 0.691581907 0.693501450 0.699889384 0.704403657 0.717288631 0.741245263 0.751230543 0.759023792 0.768962622 0.772601238 0.778778152 0.810861347 0.815187869 0.819409066 0.821637376 0.823461602 0.831517211 0.834331196 0.835971386 0.842159291 0.845686097 0.847448218 0.849423300 0.858974990 0.865886950 0.866601537 0.873902704 0.883780623 0.885093649 0.889595171 0.899176634 0.900826198 0.904041785 0.923396781 0.927085875 0.934821874 0.936645043 0.965921763 0.975847739 0.986042484 1.001144668 1.018361162 1.027978150 1.041714185 1.050771067 1.057485218 1.068639920 1.086604071 1.088652116 1.104316687 1.106396233 1.112324454 1.123684915 1.124587564 1.135822444 1.143738831 1.174340283 1.178640939 1.181056997 1.186500976 1.191276572 1.196176976 1.224421661 1.228278138 1.274820305 1.301713543 1.319476114 1.328116642 1.332955895 1.335480201 1.336217385 1.342223428 1.343031630 1.344958738 1.359023358 1.378674080 1.382895501 1.384262805 1.415450952 1.420020526 1.436375663 1.551474953 1.681488408 1.776028783</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">221</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33828172" y3="0.05972702" z3="-0.1902758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38408554" y3="0.16948978" z3="0.41993765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64656322" y3="0.44425738" z3="-0.34034479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73297303" y3="1.24009128" z3="-2.26477547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38882003" y3="0.4439233" z3="-1.18436986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73347263" y3="0.85033831" z3="-3.66569486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64118424" y3="1.75212477" z3="-3.14142554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3952342" y3="2.59554138" z3="-4.63163192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56843968" y3="1.25539262" z3="-4.38220272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51845052" y3="2.93146935" z3="-5.19400901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92457835" y3="-0.47986481" z3="-3.43961769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09710649" y3="0.05887848" z3="-1.00149667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39888662" y3="-1.08711916" z3="-1.99747763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92741603" y3="-0.95469802" z3="-1.82493253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10042156" y3="-2.41158448" z3="-1.83905728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14227397" y3="-3.62016625" z3="0.67560626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01005734" y3="-5.23533063" z3="-4.74779405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23935046" y3="-4.9835282" z3="-3.70879863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83980983" y3="-4.30706616" z3="-1.0863234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78369487" y3="-4.57448513" z3="-2.85551532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55494943" y3="-5.08080027" z3="-3.25075804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85594247" y3="-4.73748047" z3="-1.9350872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49539284" y3="-4.25087821" z3="-1.52803971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81570675" y3="-4.48704401" z3="-3.20224426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35379764" y3="-5.39374807" z3="-3.9273853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89168989" y3="-4.7830433" z3="-1.59172098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03052533" y3="-3.8644879" z3="0.23625756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1714088" y3="-3.65761794" z3="0.88190334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05763785" y3="-4.12223275" z3="0.4466502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16724915" y3="-3.52624079" z3="2.34903826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22529621" y3="-3.35024292" z3="5.14753098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36192499" y3="-3.74109378" z3="3.05177752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00233942" y3="-3.22823434" z3="3.07128113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02842853" y3="-3.14096334" z3="4.46034895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3903618" y3="-3.65491965" z3="4.44093751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27473875" y3="-3.98653561" z3="2.50286449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04459547" y3="-3.08526305" z3="2.56674329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09899286" y3="-2.93108761" z3="4.99961676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32702731" y3="-3.83407735" z3="4.9757153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24501542" y3="-3.29020278" z3="6.23945701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41369318" y3="-3.88570584" z3="-0.62275219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17270039" y3="-3.37940078" z3="-1.07355285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52418743" y3="0.25189717" z3="-4.71500683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08609476" y3="-1.7320623" z3="0.02913225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9122993" y3="-0.98485665" z3="1.19316875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85263968" y3="-0.33247608" z3="1.52867383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38224348" y3="0.54840714" z3="1.2285515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47070472" y3="1.45327301" z3="-0.39447097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97617353" y3="-0.70213004" z3="1.39697201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37037363" y3="1.73537383" z3="2.67804618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88662833" y3="-0.98132005" z3="2.09173373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65932235" y3="-0.37091455" z3="3.35219111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22532163" y3="0.76863877" z3="-1.22420953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29541073" y3="2.25130337" z3="-0.38756229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45566597" y3="1.92707214" z3="-0.55260721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01149956" y3="-1.0688778" z3="2.43630004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9462822" y3="-0.23484282" z3="1.15503501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85145293" y3="-1.54318587" z3="0.69560694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4161891" y3="1.1914179" z3="3.63819733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56050694" y3="2.33140332" z3="2.67333077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2193447" y3="2.44085355" z3="2.63624395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79692896" y3="-0.82695815" z3="3.86367034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5740635" y3="-0.547983" z3="3.93353082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49034179" y3="0.71185741" z3="3.23513207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83605823" y3="-0.69368989" z3="0.993713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41511066" y3="-2.02277487" z3="0.85845406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76284595" y3="-2.66774023" z3="1.9019283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54803912" y3="-1.97049831" z3="3.08711286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02065637" y3="-0.67547388" z3="3.27887057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67290111" y3="-0.04412981" z3="2.22449224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52430822" y3="-2.5237843" z3="-0.10497552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37070879" y3="-3.67857931" z3="1.78098484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68670685" y3="-2.57016452" z3="4.11128647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83363748" y3="-0.16248067" z3="4.22282843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01155834" y3="0.98946653" z3="2.33694449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79022349" y3="0.47692975" z3="-4.2844657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.773787" y3="-0.48821534" z3="-4.45591376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43266656" y3="-1.6816934" z3="-5.08319748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14933467" y3="-1.9173462" z3="-5.56572757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82768938" y3="-0.94893676" z3="-5.36944287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02960677" y3="1.40193029" z3="-3.75341046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79002881" y3="-0.33851475" z3="-4.09076903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4483788" y3="-2.7277082" z3="-5.21729294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0760747" y3="-2.85896376" z3="-6.06709542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84752396" y3="-1.13827365" z3="-5.70899335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35191823" y3="-1.87418079" z3="5.05015927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31609079" y3="-3.71371905" z3="3.94647305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23288167" y3="-3.62860667" z3="-5.99963354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4455872" y3="-2.64123613" z3="-4.52842021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07508776" y3="1.16002883" z3="-1.4913883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11741202" y3="1.54939786" z3="-2.47260638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4456763" y3="1.48241084" z3="-1.68880791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8602497" y3="2.14043671" z3="-2.82068842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16964025" y3="1.18529922" z3="-0.92366206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91839466" y3="2.37874885" z3="-2.9642176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58229645" y3="2.21118413" z3="-3.6431532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9154342" y3="2.49754016" z3="-3.8125053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86340202" y3="2.48312576" z3="-4.41950648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25034123" y3="2.99973833" z3="-4.72431278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41707533" y3="3.15541969" z3="-3.3480813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30553369" y3="3.56770105" z3="-4.14078022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22818006" y3="4.1663043" z3="-2.7592869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98432539" y3="5.49892611" z3="-2.99237099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05379686" y3="3.87777906" z3="-2.10688069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62416616" y3="6.25399784" z3="-2.52783771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08807914" y3="4.95309552" z3="-4.37634584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91166528" y3="5.90202763" z3="-3.82267587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23952559" y3="5.25076872" z3="-5.00014053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73293375" y3="6.96505071" z3="-4.00759871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4833172" y3="-2.21274008" z3="-0.29023233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45310943" y3="-3.0017563" z3="-1.06142349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00930827" y3="-2.60043723" z3="0.59747119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10143073" y3="-1.39290651" z3="-0.70296925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18351617" y3="-1.4293794" z3="-1.14043603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32639266" y3="-0.38904555" z3="-1.48617029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10711938" y3="-1.5486925" z3="-0.93553704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4227323" y3="-2.0829537" z3="-1.99384685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3383,.0597,-.1903;7.3841,.1695,.4199;6.6466,.4443,-.3403;4.733,1.2401,-2.2648;4.3888,.4439,-1.1844;2.7335,.8503,-3.6657;3.6412,1.7521,-3.1414;1.3952,2.5955,-4.6316;1.5684,1.2554,-4.3822;.5185,2.9315,-5.194;2.9246,-.4799,-3.4396;3.0971,.0589,-1.0015;2.3989,-1.0871,-1.9975;.9274,-.9547,-1.8249;3.1004,-2.4116,-1.8391;-.1423,-3.6202,.6756;-.0101,-5.2353,-4.7478;-.2394,-4.9835,-3.7088;-.8398,-4.3071,-1.0863;.7837,-4.5745,-2.8555;-1.5549,-5.0808,-3.2508;-1.8559,-4.7375,-1.9351;.4954,-4.2509,-1.528;1.8157,-4.487,-3.2022;-2.3538,-5.3937,-3.9274;-2.8917,-4.783,-1.5917;-1.0305,-3.8645,.2363;-2.1714,-3.6576,.8819;-3.0576,-4.1222,.4467;-2.1672,-3.5262,2.349;-2.2253,-3.3502,5.1475;-3.3619,-3.7411,3.0518;-1.0023,-3.2282,3.0713;-1.0284,-3.141,4.4603;-3.3904,-3.6549,4.4409;-4.2747,-3.9865,2.5029;-.0446,-3.0853,2.5667;-.099,-2.9311,4.9996;-4.327,-3.8341,4.9757;-2.245,-3.2902,6.2395;1.4137,-3.8857,-.6228;2.1727,-3.3794,-1.0736;.5242,.2519,-4.715;-3.0861,-1.7321,.0291;-2.9123,-.9849,1.1932;-1.8526,-.3325,1.5287;-.3822,.5484,1.2286;-.4707,1.4533,-.3945;.9762,-.7021,1.397;-.3704,1.7354,2.678;-3.8866,-.9813,2.0917;-3.6593,-.3709,3.3522;-.2253,.7686,-1.2242;.2954,2.2513,-.3876;-1.4557,1.9271,-.5526;1.0115,-1.0689,2.4363;1.9463,-.2348,1.155;.8515,-1.5432,.6956;-.4162,1.1914,3.6382;.5605,2.3314,2.6733;-1.2193,2.4409,2.6362;-2.7969,-.827,3.8637;-4.5741,-.548,3.9335;-3.4903,.7119,3.2351;4.8361,-.6937,.9937;4.4151,-2.0228,.8585;3.7628,-2.6677,1.9019;3.548,-1.9705,3.0871;4.0207,-.6755,3.2789;4.6729,-.0441,2.2245;4.5243,-2.5238,-.105;3.3707,-3.6786,1.781;2.6867,-2.5702,4.1113;3.8336,-.1625,4.2228;5.0116,.9895,2.3369;-.7902,.4769,-4.2845;-1.7738,-.4882,-4.4559;-1.4327,-1.6817,-5.0832;-.1493,-1.9173,-5.5657;.8277,-.9489,-5.3694;-1.0296,1.4019,-3.7534;-2.79,-.3385,-4.0908;-2.4484,-2.7277,-5.2173;.0761,-2.859,-6.0671;1.8475,-1.1383,-5.709;2.3519,-1.8742,5.0502;2.3161,-3.7137,3.9465;-2.2329,-3.6286,-5.9996;-3.4456,-2.6412,-4.5284;7.0751,1.16,-1.4914;6.1174,1.5494,-2.4726;8.4457,1.4824,-1.6888;8.8602,2.1404,-2.8207;9.1696,1.1853,-.9237;9.9184,2.3787,-2.9642;6.5823,2.2112,-3.6432;7.9154,2.4975,-3.8125;5.8634,2.4831,-4.4195;8.2503,2.9997,-4.7243;3.4171,3.1554,-3.3481;2.3055,3.5677,-4.1408;4.2282,4.1663,-2.7593;3.9843,5.4989,-2.9924;5.0538,3.8778,-2.1069;4.6242,6.254,-2.5278;2.0881,4.9531,-4.3763;2.9117,5.902,-3.8227;1.2395,5.2508,-5.0001;2.7329,6.9651,-4.0076;-4.4833,-2.2127,-.2902;-4.4531,-3.0018,-1.0614;-5.0093,-2.6004,.5975;-5.1014,-1.3929,-.703;-2.1835,-1.4294,-1.1404;-2.3264,-.389,-1.4862;-1.1071,-1.5487,-.9355;-2.4227,-2.083,-1.9938;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417483695</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001526619847 0.000310047869 0.024115462595 0.005339148714</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030648089 -0.000318310 0.000051666 0.000149941 0.000223353 0.000332543 0.000394257 0.000429712 0.000584718 0.000801811 0.000938550 0.001060126 0.001281160 0.001344751 0.001379884 0.001422583 0.001603048 0.001810577 0.001835115 0.001953304 0.002144025 0.002440800 0.002611500 0.002707689 0.002859002 0.002925758 0.003149310 0.003473853 0.003782787 0.003953298 0.004442382 0.004739075 0.004807443 0.005091297 0.006043837 0.006075195 0.006208074 0.006618756 0.006926367 0.007633387 0.008104165 0.008230510 0.009262983 0.009563435 0.010008113 0.010699194 0.011023737 0.011448289 0.011733968 0.012234817 0.012921044 0.013149523 0.014021407 0.014547750 0.015119840 0.015452745 0.015719597 0.016244632 0.016925381 0.017483384 0.018109658 0.018155970 0.019408103 0.019555988 0.019991771 0.020805442 0.021215284 0.021435890 0.022546488 0.023138437 0.025166081 0.026054275 0.026781234 0.027005277 0.027544112 0.029297168 0.029518552 0.031422579 0.033293648 0.033500358 0.033913694 0.035815989 0.036866199 0.037649307 0.039610867 0.039985413 0.040789154 0.042294661 0.044296417 0.045108716 0.045460646 0.046965124 0.047722179 0.049208388 0.050347246 0.050832727 0.051067152 0.051265547 0.052478925 0.052623066 0.052883664 0.053045586 0.054712099 0.054893299 0.055901484 0.056235305 0.056498386 0.056603740 0.057054402 0.058446376 0.060325017 0.060830861 0.061653913 0.062126374 0.063254414 0.064408978 0.065165818 0.065879281 0.066437154 0.067848092 0.068964095 0.070240387 0.072707282 0.074466186 0.074654623 0.076202314 0.078131009 0.083623918 0.085375472 0.086977289 0.087275749 0.088088320 0.090416927 0.090954714 0.092998062 0.094602457 0.095370761 0.096397797 0.097396150 0.097914160 0.098881362 0.099964716 0.100352431 0.102426911 0.103152357 0.103375378 0.103703203 0.104233275 0.105828463 0.106908280 0.107400467 0.109619605 0.110800255 0.111890464 0.112546953 0.114860003 0.115658837 0.116311168 0.118636512 0.120315759 0.121021274 0.122825133 0.124212107 0.125138446 0.125874411 0.126276590 0.127042423 0.131962954 0.135031827 0.135745566 0.142739857 0.143556219 0.147011750 0.147357460 0.149683937 0.152488691 0.154772599 0.156176957 0.156707197 0.161552591 0.161851291 0.173481187 0.174033694 0.179829473 0.184186802 0.185386704 0.189474703 0.190286733 0.194027381 0.194199390 0.198344559 0.200140721 0.205227436 0.206896127 0.207256656 0.210119487 0.214405848 0.216428942 0.217794286 0.218436842 0.220689545 0.225187485 0.226236631 0.232098588 0.235054536 0.235454760 0.235910160 0.244570682 0.255993689 0.257237469 0.263561915 0.269832077 0.280345600 0.282934364 0.286271889 0.291570703 0.296702187 0.304328983 0.305717020 0.307277443 0.314052515 0.316674919 0.317369898 0.322100572 0.329715650 0.332795776 0.351788232 0.352123894 0.354869203 0.355760667 0.360088427 0.362779057 0.364013840 0.384346923 0.386076095 0.391930618 0.410667499 0.425537933 0.430830660 0.462213610 0.468653708 0.478219471 0.483610346 0.484211697 0.487609941 0.491349726 0.509496840 0.515255679 0.535210974 0.566358675 0.573355819 0.592301642 0.593697577 0.606416354 0.607972699 0.644662328 0.646862077 0.649091686 0.674274426 0.677781354 0.685486876 0.691617065 0.693501852 0.699891109 0.704403924 0.717289355 0.741245794 0.751230858 0.759027516 0.769013593 0.772612271 0.778778846 0.810862958 0.815242214 0.819418075 0.821637902 0.823462827 0.831533299 0.834428517 0.835995698 0.842159356 0.845686273 0.847450830 0.849430333 0.858987158 0.865887015 0.866601516 0.873923130 0.883878892 0.885282916 0.889597032 0.899260220 0.900838229 0.904044630 0.923397199 0.927148100 0.934917931 0.936729934 0.965936174 0.975863113 0.986043074 1.001145196 1.018370092 1.027978728 1.041715434 1.050771062 1.057498895 1.068644946 1.086607137 1.088662897 1.104326903 1.106402839 1.112332473 1.123775596 1.124625863 1.135844104 1.143776735 1.174382255 1.178691553 1.181056989 1.186501323 1.191308678 1.196179864 1.224462454 1.228300302 1.274820175 1.301758944 1.319492541 1.328122810 1.333018140 1.335494925 1.336231792 1.342330675 1.343034412 1.344975385 1.359042983 1.378685046 1.382895536 1.384262931 1.415487691 1.420117772 1.436376326 1.551475274 1.681499198 1.776040211</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">222</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3417163" y3="0.05350468" z3="-0.19257512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38895062" y3="0.16373655" z3="0.4149978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65013032" y3="0.43913779" z3="-0.34388417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73315622" y3="1.23592127" z3="-2.26461835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39079929" y3="0.43838059" z3="-1.18503986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73161566" y3="0.84872957" z3="-3.66245837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63985666" y3="1.74949501" z3="-3.13823448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38886306" y3="2.59581212" z3="-4.61898185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56458364" y3="1.25479232" z3="-4.37498679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51028553" y3="2.93266674" z3="-5.17800713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92379334" y3="-0.4815747" z3="-3.43943151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0995919" y3="0.05310211" z3="-1.00106275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40056703" y3="-1.09166678" z3="-1.99768363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92926652" y3="-0.96010276" z3="-1.82318029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10248117" y3="-2.4161821" z3="-1.84205641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14146411" y3="-3.61849687" z3="0.67425696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0080597" y3="-5.24028521" z3="-4.7464629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23760174" y3="-4.98730824" z3="-3.70786858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83742262" y3="-4.30895801" z3="-1.08620181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78584372" y3="-4.57915663" z3="-2.85442434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55321192" y3="-5.08301548" z3="-3.25053057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85397747" y3="-4.73863017" z3="-1.93514841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49796443" y3="-4.25456372" z3="-1.52719302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8189079" y3="-4.49523831" z3="-3.20097566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35036851" y3="-5.39720395" z3="-3.92709366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89092097" y3="-4.78006488" z3="-1.59187042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02863643" y3="-3.86493916" z3="0.23569954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16986239" y3="-3.65630277" z3="0.88064058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05584178" y3="-4.12183644" z3="0.44654665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16487598" y3="-3.52310789" z3="2.34795739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22346011" y3="-3.34141783" z3="5.14596056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35925204" y3="-3.73703" z3="3.05140363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99906769" y3="-3.22468313" z3="3.06969546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02576911" y3="-3.13439351" z3="4.45832616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38726737" y3="-3.64894682" z3="4.44044381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27330285" y3="-3.98200797" z3="2.50295549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04026386" y3="-3.08390546" z3="2.56483848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09912627" y3="-2.92004239" z3="4.99676259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32409974" y3="-3.82679883" z3="4.97565433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24385586" y3="-3.278852" z3="6.23750003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41654976" y3="-3.8895273" z3="-0.62197077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17519246" y3="-3.38401787" z3="-1.07357888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52151709" y3="0.25142631" z3="-4.70927296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08475419" y3="-1.7321588" z3="0.02564843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91123553" y3="-0.98289052" z3="1.18865725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8508763" y3="-0.33062306" z3="1.52325841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38292809" y3="0.55369123" z3="1.22341507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47018779" y3="1.45267887" z3="-0.40310105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97790653" y3="-0.69310655" z3="1.40022351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37742989" y3="1.74671521" z3="2.6677855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88608595" y3="-0.97769597" z3="2.08658607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65957222" y3="-0.36544101" z3="3.34642955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21969446" y3="0.76560079" z3="-1.22972077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29175725" y3="2.2546914" z3="-0.39685881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45711864" y3="1.92108596" z3="-0.56599521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01128123" y3="-1.05652393" z3="2.4408351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94739607" y3="-0.22473947" z3="1.15927702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85671714" y3="-1.53653135" z3="0.70126277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42625469" y3="1.20762084" z3="3.63048991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55287685" y3="2.34321328" z3="2.66333536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2264245" y3="2.451565" z3="2.61961403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79666868" y3="-0.82107342" z3="3.85850644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57446236" y3="-0.54242165" z3="3.92720856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49103788" y3="0.71747971" z3="3.22816192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83969444" y3="-0.69918118" z3="0.99182224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41379192" y3="-2.02655562" z3="0.85629487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76028295" y3="-2.66970705" z3="1.90012547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54956017" y3="-1.97254779" z3="3.08613618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02731836" y3="-0.67958644" z3="3.27819979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68068693" y3="-0.04991518" z3="2.2234562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52053871" y3="-2.5273432" z3="-0.1073589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36471491" y3="-3.67890852" z3="1.77923279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6875591" y3="-2.56994284" z3="4.11101966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84374489" y3="-0.16676559" z3="4.22305818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02360651" y3="0.98234589" z3="2.33661004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79381074" y3="0.47476306" z3="-4.28104088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77624906" y3="-0.49092083" z3="-4.45638829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43284615" y3="-1.68330819" z3="-5.0813849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14829457" y3="-1.91681641" z3="-5.56333688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82712534" y3="-0.94851326" z3="-5.36707879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03487808" y3="1.39889267" z3="-3.74950635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79379025" y3="-0.34287853" z3="-4.09339019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44735897" y3="-2.73057664" z3="-5.22027313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07814346" y3="-2.85760542" z3="-6.06500412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84748466" y3="-1.13673741" z3="-5.70484052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35722625" y3="-1.87394572" z3="5.05114531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31149598" y3="-3.71175988" z3="3.94498758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22985297" y3="-3.63008857" z3="-6.00357209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44558312" y3="-2.64586949" z3="-4.53302199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07685611" y3="1.15589508" z3="-1.49489424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11723137" y3="1.54637864" z3="-2.47388123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44705331" y3="1.47793438" z3="-1.69482541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85936039" y3="2.13844918" z3="-2.82621943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17246586" y3="1.17799445" z3="-0.93229074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91673689" y3="2.37379918" z3="-2.97240441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57967376" y3="2.21102272" z3="-3.64385131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9127716" y3="2.49875286" z3="-3.8150994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85903388" y3="2.48442935" z3="-4.41811199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2458842" y3="3.00339381" z3="-4.72648019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41338899" y3="3.15365752" z3="-3.33904221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29887117" y3="3.56766418" z3="-4.12668958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22471666" y3="4.16379923" z3="-2.74863952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97861527" y3="5.49683203" z3="-2.97651088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05268917" y3="3.87404752" z3="-2.09966774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6180347" y3="6.2520343" z3="-2.50997552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0785925" y3="4.95394058" z3="-4.35621385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90308265" y3="5.9014072" z3="-3.80239568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22794122" y3="5.25259443" z3="-4.97671738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72292759" y3="6.96464987" z3="-3.98348325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48151087" y3="-2.21331356" z3="-0.29417843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44905815" y3="-3.00322078" z3="-1.06333168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00876705" y3="-2.5999613" z3="0.59256603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09861618" y3="-1.39417254" z3="-0.70949694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1821876" y3="-1.43056609" z3="-1.14422292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32371744" y3="-0.39002752" z3="-1.49131117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10467785" y3="-1.55144671" z3="-0.93875424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41816748" y3="-2.08541381" z3="-1.995673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3417,.0535,-.1926;7.389,.1637,.415;6.6501,.4391,-.3439;4.7332,1.2359,-2.2646;4.3908,.4384,-1.185;2.7316,.8487,-3.6625;3.6399,1.7495,-3.1382;1.3889,2.5958,-4.619;1.5646,1.2548,-4.375;.5103,2.9327,-5.178;2.9238,-.4816,-3.4394;3.0996,.0531,-1.0011;2.4006,-1.0917,-1.9977;.9293,-.9601,-1.8232;3.1025,-2.4162,-1.8421;-.1415,-3.6185,.6743;-.0081,-5.2403,-4.7465;-.2376,-4.9873,-3.7079;-.8374,-4.309,-1.0862;.7858,-4.5792,-2.8544;-1.5532,-5.083,-3.2505;-1.854,-4.7386,-1.9351;.498,-4.2546,-1.5272;1.8189,-4.4952,-3.201;-2.3504,-5.3972,-3.9271;-2.8909,-4.7801,-1.5919;-1.0286,-3.8649,.2357;-2.1699,-3.6563,.8806;-3.0558,-4.1218,.4465;-2.1649,-3.5231,2.348;-2.2235,-3.3414,5.146;-3.3593,-3.737,3.0514;-.9991,-3.2247,3.0697;-1.0258,-3.1344,4.4583;-3.3873,-3.6489,4.4404;-4.2733,-3.982,2.503;-.0403,-3.0839,2.5648;-.0991,-2.92,4.9968;-4.3241,-3.8268,4.9757;-2.2439,-3.2789,6.2375;1.4165,-3.8895,-.622;2.1752,-3.384,-1.0736;.5215,.2514,-4.7093;-3.0848,-1.7322,.0256;-2.9112,-.9829,1.1887;-1.8509,-.3306,1.5233;-.3829,.5537,1.2234;-.4702,1.4527,-.4031;.9779,-.6931,1.4002;-.3774,1.7467,2.6678;-3.8861,-.9777,2.0866;-3.6596,-.3654,3.3464;-.2197,.7656,-1.2297;.2918,2.2547,-.3969;-1.4571,1.9211,-.566;1.0113,-1.0565,2.4408;1.9474,-.2247,1.1593;.8567,-1.5365,.7013;-.4263,1.2076,3.6305;.5529,2.3432,2.6633;-1.2264,2.4516,2.6196;-2.7967,-.8211,3.8585;-4.5745,-.5424,3.9272;-3.491,.7175,3.2282;4.8397,-.6992,.9918;4.4138,-2.0266,.8563;3.7603,-2.6697,1.9001;3.5496,-1.9725,3.0861;4.0273,-.6796,3.2782;4.6807,-.0499,2.2235;4.5205,-2.5273,-.1074;3.3647,-3.6789,1.7792;2.6876,-2.5699,4.111;3.8437,-.1668,4.2231;5.0236,.9823,2.3366;-.7938,.4748,-4.281;-1.7762,-.4909,-4.4564;-1.4328,-1.6833,-5.0814;-.1483,-1.9168,-5.5633;.8271,-.9485,-5.3671;-1.0349,1.3989,-3.7495;-2.7938,-.3429,-4.0934;-2.4474,-2.7306,-5.2203;.0781,-2.8576,-6.065;1.8475,-1.1367,-5.7048;2.3572,-1.8739,5.0511;2.3115,-3.7118,3.945;-2.2299,-3.6301,-6.0036;-3.4456,-2.6459,-4.533;7.0769,1.1559,-1.4949;6.1172,1.5464,-2.4739;8.4471,1.4779,-1.6948;8.8594,2.1384,-2.8262;9.1725,1.178,-.9323;9.9167,2.3738,-2.9724;6.5797,2.211,-3.6439;7.9128,2.4988,-3.8151;5.859,2.4844,-4.4181;8.2459,3.0034,-4.7265;3.4134,3.1537,-3.339;2.2989,3.5677,-4.1267;4.2247,4.1638,-2.7486;3.9786,5.4968,-2.9765;5.0527,3.874,-2.0997;4.618,6.252,-2.51;2.0786,4.9539,-4.3562;2.9031,5.9014,-3.8024;1.2279,5.2526,-4.9767;2.7229,6.9646,-3.9835;-4.4815,-2.2133,-.2942;-4.4491,-3.0032,-1.0633;-5.0088,-2.6,.5926;-5.0986,-1.3942,-.7095;-2.1822,-1.4306,-1.1442;-2.3237,-.39,-1.4913;-1.1047,-1.5514,-.9388;-2.4182,-2.0854,-1.9957;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421192453</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001159863971 0.000240554413 0.021684489011 0.005330213929</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030648830 -0.000308894 0.000071760 0.000147515 0.000221261 0.000329978 0.000398631 0.000429076 0.000584604 0.000801917 0.000938236 0.001060473 0.001281532 0.001345874 0.001383771 0.001422776 0.001602911 0.001811089 0.001835248 0.001953813 0.002143681 0.002439380 0.002611699 0.002707520 0.002863768 0.002930398 0.003150001 0.003474930 0.003783104 0.003953389 0.004443373 0.004738874 0.004807941 0.005091003 0.006044103 0.006075443 0.006208535 0.006618719 0.006926993 0.007633683 0.008104082 0.008231468 0.009263097 0.009563287 0.010008382 0.010699571 0.011028414 0.011449230 0.011741609 0.012240118 0.012921716 0.013148449 0.014023095 0.014560632 0.015120961 0.015456335 0.015720769 0.016246912 0.016928062 0.017483351 0.018109750 0.018183742 0.019408132 0.019556860 0.019995241 0.020805596 0.021215265 0.021436489 0.022554964 0.023139495 0.025169156 0.026060403 0.026787134 0.027005208 0.027570794 0.029301676 0.029524432 0.031423122 0.033294864 0.033500450 0.033914973 0.035815970 0.036867429 0.037652257 0.039611146 0.039988081 0.040790862 0.042301717 0.044296944 0.045128233 0.045462694 0.046965013 0.047722069 0.049208706 0.050348940 0.050838374 0.051072063 0.051269543 0.052478954 0.052627576 0.052884637 0.053045454 0.054712631 0.054898879 0.055901829 0.056236786 0.056498347 0.056608280 0.057059840 0.058446157 0.060325853 0.060830833 0.061665458 0.062126448 0.063259302 0.064409927 0.065172165 0.065888279 0.066439077 0.067849412 0.068965926 0.070240960 0.072709873 0.074466590 0.074677348 0.076203359 0.078162624 0.083624541 0.085388528 0.086981449 0.087276926 0.088096952 0.090417248 0.090955295 0.092997787 0.094602587 0.095372947 0.096399556 0.097413601 0.097915761 0.098881260 0.099964624 0.100352423 0.102427072 0.103165598 0.103377402 0.103709095 0.104236180 0.105838959 0.106911002 0.107400416 0.109619357 0.110806420 0.111891231 0.112547132 0.114861003 0.115658677 0.116311416 0.118643285 0.120322789 0.121026180 0.122835289 0.124235852 0.125178980 0.125903931 0.126278468 0.127042565 0.131967630 0.135031993 0.135746987 0.142740398 0.143556170 0.147011682 0.147367162 0.149683573 0.152492816 0.154773572 0.156181056 0.156708623 0.161555474 0.161852727 0.173498014 0.174033891 0.179832094 0.184213989 0.185411814 0.189483662 0.190291235 0.194035721 0.194208322 0.198344660 0.200142180 0.205227409 0.206896742 0.207262990 0.210134555 0.214442290 0.216434921 0.217804797 0.218451019 0.220689640 0.225194719 0.226241236 0.232111335 0.235073260 0.235460498 0.235910927 0.244570682 0.255994945 0.257239268 0.263577736 0.269832879 0.280347071 0.282940131 0.286285500 0.291573140 0.296702222 0.304329173 0.305717177 0.307279576 0.314069429 0.316681100 0.317372417 0.322113301 0.329719501 0.332798895 0.351788763 0.352132170 0.354869178 0.355760643 0.360088562 0.362779269 0.364057136 0.384360755 0.386079337 0.391935193 0.410667708 0.425551900 0.430846889 0.462229392 0.468654463 0.478226208 0.483616718 0.484228043 0.487616011 0.491368847 0.509497363 0.515258510 0.535213035 0.566374926 0.573384269 0.592304143 0.593714304 0.606416544 0.607973647 0.644662321 0.646870032 0.649130648 0.674275912 0.677781574 0.685501408 0.691667318 0.693505280 0.699905489 0.704404291 0.717291245 0.741247330 0.751230925 0.759029254 0.769067636 0.772622703 0.778778929 0.810863860 0.815262684 0.819418178 0.821638253 0.823463229 0.831542718 0.834464310 0.836004455 0.842162589 0.845689660 0.847455079 0.849435977 0.859004137 0.865887034 0.866602735 0.873929633 0.883942643 0.885406970 0.889603798 0.899318740 0.900850059 0.904046010 0.923397199 0.927182820 0.934971157 0.936785483 0.965955962 0.975873350 0.986043279 1.001146258 1.018381286 1.027981874 1.041716465 1.050771889 1.057501213 1.068645554 1.086609953 1.088671942 1.104337743 1.106406864 1.112339818 1.123807274 1.124686591 1.135856433 1.143788544 1.174400498 1.178723688 1.181058736 1.186505013 1.191324884 1.196186721 1.224494522 1.228313467 1.274824325 1.301774389 1.319504386 1.328123672 1.333035733 1.335496001 1.336243014 1.342378936 1.343045210 1.344976921 1.359047266 1.378687024 1.382895584 1.384262864 1.415532833 1.420175901 1.436378082 1.551475269 1.681521828 1.776043299</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">223</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34411973" y3="0.04782551" z3="-0.19442647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39179129" y3="0.15744545" z3="0.4102011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65180861" y3="0.43385239" z3="-0.34711567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73189923" y3="1.2347191" z3="-2.26312284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3917584" y3="0.43404404" z3="-1.18495852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72895918" y3="0.84785265" z3="-3.65943406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63634719" y3="1.74897808" z3="-3.13369283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38149856" y3="2.59516744" z3="-4.60861164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56015382" y3="1.25363151" z3="-4.36947266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50165812" y3="2.93203978" z3="-5.16560457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92385122" y3="-0.4828335" z3="-3.43983098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10107215" y3="0.04675021" z3="-1.00039496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40209856" y3="-1.0964383" z3="-1.99894873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.930899" y3="-0.9658551" z3="-1.82291972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10455019" y3="-2.42103489" z3="-1.84664397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13926904" y3="-3.61909292" z3="0.67435515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00877742" y3="-5.24775004" z3="-4.7453599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23771843" y3="-4.9932133" z3="-3.70693741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83720985" y3="-4.30968308" z3="-1.08578365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78599088" y3="-4.58469072" z3="-2.85416185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55366453" y3="-5.08618676" z3="-3.24902451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85418078" y3="-4.73945181" z3="-1.93406245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49827264" y3="-4.25753268" z3="-1.52742999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81820683" y3="-4.50034712" z3="-3.20077641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35266056" y3="-5.39921191" z3="-3.92514391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89010898" y3="-4.78168458" z3="-1.59086155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02756081" y3="-3.86352521" z3="0.23573447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16823567" y3="-3.65374476" z3="0.88075343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05476502" y3="-4.1184153" z3="0.44666227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16410695" y3="-3.51793759" z3="2.34749877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22360947" y3="-3.33193008" z3="5.14511678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35951374" y3="-3.72807035" z3="3.05060276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99882099" y3="-3.21980912" z3="3.0691037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02584525" y3="-3.12767193" z3="4.45765137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38858172" y3="-3.63695684" z3="4.43932427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27295609" y3="-3.97298485" z3="2.5022725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04049322" y3="-3.08000117" z3="2.56456719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09679878" y3="-2.91758942" z3="4.99649136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32576299" y3="-3.81237297" z3="4.97434956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24416061" y3="-3.26777048" z3="6.23661499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41753059" y3="-3.89187868" z3="-0.62309126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17677384" y3="-3.38824808" z3="-1.07581011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51908474" y3="0.24886676" z3="-4.70694869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0810907" y3="-1.72924511" z3="0.02284114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90801733" y3="-0.97862013" z3="1.18476454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84827768" y3="-0.32570002" z3="1.51909733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38009173" y3="0.55883458" z3="1.22006767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46394917" y3="1.45316072" z3="-0.40911594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98103692" y3="-0.6866259" z3="1.40409574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37912743" y3="1.75610116" z3="2.66061352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88332118" y3="-0.97206527" z3="2.08230433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65786581" y3="-0.35696536" z3="3.34071746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21103717" y3="0.76436459" z3="-1.23331552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29675506" y3="2.25616928" z3="-0.40312411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45106562" y3="1.91996716" z3="-0.57522565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01161069" y3="-1.04668905" z3="2.44589642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9519687" y3="-0.22010999" z3="1.1637863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86105372" y3="-1.53252686" z3="0.70785782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43675812" y3="1.22004763" z3="3.62461629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55420171" y3="2.34792919" z3="2.66030159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22437043" y3="2.46497089" z3="2.60441521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79589411" y3="-0.81104338" z3="3.85491269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57339959" y3="-0.53235088" z3="3.92135363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48906377" y3="0.7257016" z3="3.22013866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84339083" y3="-0.7064837" z3="0.98956974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41408011" y3="-2.0325667" z3="0.85232043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75930908" y3="-2.67554623" z3="1.89543923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55118953" y3="-1.97970466" z3="3.0825761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03323755" y3="-0.68860626" z3="3.27668876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68736571" y3="-0.05897391" z3="2.22240633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5185081" y3="-2.53208089" z3="-0.11237184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36039319" y3="-3.68335219" z3="1.77279563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68817984" y3="-2.57621237" z3="4.10705817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85179505" y3="-0.176851" z3="4.22239882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03278195" y3="0.97215007" z3="2.33663377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79767249" y3="0.46902109" z3="-4.28055815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77770022" y3="-0.49862076" z3="-4.45756437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4305396" y3="-1.68988515" z3="-5.08537069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14466001" y3="-1.92049034" z3="-5.56401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8283797" y3="-0.94954415" z3="-5.36326015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04206809" y3="1.39198177" z3="-3.74826792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79592253" y3="-0.35270356" z3="-4.09620166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44232115" y3="-2.73893963" z3="-5.22485011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08544908" y3="-2.86037777" z3="-6.06611981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84992643" y3="-1.13514018" z3="-5.69957316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36109878" y3="-1.88087781" z3="5.04908853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30882006" y3="-3.71658541" z3="3.93960572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22034986" y3="-3.63808041" z3="-6.00714246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44302068" y3="-2.65613557" z3="-4.54058245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07635783" y3="1.15386249" z3="-1.49706518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11528898" y3="1.54664412" z3="-2.47366187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44598159" y3="1.47800337" z3="-1.69768557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85620352" y3="2.14173135" z3="-2.82776426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17276027" y3="1.17778184" z3="-0.93645985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.913652" y3="2.38170608" z3="-2.97362813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57569421" y3="2.21473622" z3="-3.64240639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90794188" y3="2.50330147" z3="-3.8146142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85405824" y3="2.48984471" z3="-4.4150821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23943285" y3="3.01120407" z3="-4.72476989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40751051" y3="3.15289032" z3="-3.33065653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29067166" y3="3.56704661" z3="-4.11489945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21907835" y3="4.1621881" z3="-2.7398655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97026182" y3="5.49562122" z3="-2.96313342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04915022" y3="3.8717387" z3="-2.09393983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61061854" y3="6.24963723" z3="-2.49737041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06778752" y3="4.95338416" z3="-4.33996178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89176915" y3="5.90098673" z3="-3.78477007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21503343" y3="5.25264523" z3="-4.95725235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70900698" y3="6.96470831" z3="-3.96179876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47829371" y3="-2.2097884" z3="-0.29683482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44754954" y3="-3.00011903" z3="-1.06635673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00529215" y3="-2.59560393" z3="0.5907821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09573296" y3="-1.39046073" z3="-0.71177596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1770829" y3="-1.43023268" z3="-1.14645498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31818176" y3="-0.39058846" z3="-1.49458238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1007039" y3="-1.55076428" z3="-0.94009943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41523052" y3="-2.08539684" z3="-1.99836944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3441,.0478,-.1944;7.3918,.1574,.4102;6.6518,.4339,-.3471;4.7319,1.2347,-2.2631;4.3918,.434,-1.185;2.729,.8479,-3.6594;3.6363,1.749,-3.1337;1.3815,2.5952,-4.6086;1.5602,1.2536,-4.3695;.5017,2.932,-5.1656;2.9239,-.4828,-3.4398;3.1011,.0468,-1.0004;2.4021,-1.0964,-1.9989;.9309,-.9659,-1.8229;3.1046,-2.421,-1.8466;-.1393,-3.6191,.6744;-.0088,-5.2478,-4.7454;-.2377,-4.9932,-3.7069;-.8372,-4.3097,-1.0858;.786,-4.5847,-2.8542;-1.5537,-5.0862,-3.249;-1.8542,-4.7395,-1.9341;.4983,-4.2575,-1.5274;1.8182,-4.5003,-3.2008;-2.3527,-5.3992,-3.9251;-2.8901,-4.7817,-1.5909;-1.0276,-3.8635,.2357;-2.1682,-3.6537,.8808;-3.0548,-4.1184,.4467;-2.1641,-3.5179,2.3475;-2.2236,-3.3319,5.1451;-3.3595,-3.7281,3.0506;-.9988,-3.2198,3.0691;-1.0258,-3.1277,4.4577;-3.3886,-3.637,4.4393;-4.273,-3.973,2.5023;-.0405,-3.08,2.5646;-.0968,-2.9176,4.9965;-4.3258,-3.8124,4.9743;-2.2442,-3.2678,6.2366;1.4175,-3.8919,-.6231;2.1768,-3.3882,-1.0758;.5191,.2489,-4.7069;-3.0811,-1.7292,.0228;-2.908,-.9786,1.1848;-1.8483,-.3257,1.5191;-.3801,.5588,1.2201;-.4639,1.4532,-.4091;.981,-.6866,1.4041;-.3791,1.7561,2.6606;-3.8833,-.9721,2.0823;-3.6579,-.357,3.3407;-.211,.7644,-1.2333;.2968,2.2562,-.4031;-1.4511,1.92,-.5752;1.0116,-1.0467,2.4459;1.952,-.2201,1.1638;.8611,-1.5325,.7079;-.4368,1.22,3.6246;.5542,2.3479,2.6603;-1.2244,2.465,2.6044;-2.7959,-.811,3.8549;-4.5734,-.5324,3.9214;-3.4891,.7257,3.2201;4.8434,-.7065,.9896;4.4141,-2.0326,.8523;3.7593,-2.6755,1.8954;3.5512,-1.9797,3.0826;4.0332,-.6886,3.2767;4.6874,-.059,2.2224;4.5185,-2.5321,-.1124;3.3604,-3.6834,1.7728;2.6882,-2.5762,4.1071;3.8518,-.1769,4.2224;5.0328,.9722,2.3366;-.7977,.469,-4.2806;-1.7777,-.4986,-4.4576;-1.4305,-1.6899,-5.0854;-.1447,-1.9205,-5.564;.8284,-.9495,-5.3633;-1.0421,1.392,-3.7483;-2.7959,-.3527,-4.0962;-2.4423,-2.7389,-5.2249;.0854,-2.8604,-6.0661;1.8499,-1.1351,-5.6996;2.3611,-1.8809,5.0491;2.3088,-3.7166,3.9396;-2.2203,-3.6381,-6.0071;-3.443,-2.6561,-4.5406;7.0764,1.1539,-1.4971;6.1153,1.5466,-2.4737;8.446,1.478,-1.6977;8.8562,2.1417,-2.8278;9.1728,1.1778,-.9365;9.9137,2.3817,-2.9736;6.5757,2.2147,-3.6424;7.9079,2.5033,-3.8146;5.8541,2.4898,-4.4151;8.2394,3.0112,-4.7248;3.4075,3.1529,-3.3307;2.2907,3.567,-4.1149;4.2191,4.1622,-2.7399;3.9703,5.4956,-2.9631;5.0492,3.8717,-2.0939;4.6106,6.2496,-2.4974;2.0678,4.9534,-4.34;2.8918,5.901,-3.7848;1.215,5.2526,-4.9573;2.709,6.9647,-3.9618;-4.4783,-2.2098,-.2968;-4.4475,-3.0001,-1.0664;-5.0053,-2.5956,.5908;-5.0957,-1.3905,-.7118;-2.1771,-1.4302,-1.1465;-2.3182,-.3906,-1.4946;-1.1007,-1.5508,-.9401;-2.4152,-2.0854,-1.9984;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421238308</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001136539250 0.000224580001 0.014417930510 0.005330855513</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030648656 -0.000226611 0.000085817 0.000144577 0.000223590 0.000322888 0.000397192 0.000430060 0.000584551 0.000801710 0.000938948 0.001060493 0.001282470 0.001349788 0.001387270 0.001423680 0.001603198 0.001812477 0.001835242 0.001953474 0.002143773 0.002443505 0.002612398 0.002707485 0.002880277 0.002929710 0.003149040 0.003475719 0.003783595 0.003953580 0.004444950 0.004738979 0.004808178 0.005090785 0.006043685 0.006075473 0.006208590 0.006618752 0.006927420 0.007634301 0.008104047 0.008234631 0.009263211 0.009563471 0.010008574 0.010705569 0.011028129 0.011448650 0.011749978 0.012240492 0.012922388 0.013149591 0.014023434 0.014567693 0.015121480 0.015458308 0.015720555 0.016247930 0.016929661 0.017482974 0.018109820 0.018200931 0.019408460 0.019558384 0.019998234 0.020805526 0.021215224 0.021438303 0.022560998 0.023140241 0.025170440 0.026065323 0.026792807 0.027004984 0.027591720 0.029305821 0.029531688 0.031424678 0.033295095 0.033500293 0.033915774 0.035817263 0.036867921 0.037653595 0.039610910 0.039994270 0.040793106 0.042304624 0.044297177 0.045142894 0.045464067 0.046965507 0.047722281 0.049209584 0.050349913 0.050841519 0.051077190 0.051272052 0.052478970 0.052631374 0.052885661 0.053046122 0.054712730 0.054901385 0.055902091 0.056237905 0.056498158 0.056611367 0.057064847 0.058446151 0.060327042 0.060831126 0.061674233 0.062126426 0.063260544 0.064411257 0.065173117 0.065894225 0.066439271 0.067850762 0.068968790 0.070242555 0.072712737 0.074466580 0.074690793 0.076203947 0.078191848 0.083626012 0.085401001 0.086989822 0.087277109 0.088105812 0.090417471 0.090955836 0.092997453 0.094602593 0.095373236 0.096401923 0.097436671 0.097919060 0.098881196 0.099964629 0.100353229 0.102427553 0.103175308 0.103378986 0.103709258 0.104235933 0.105840419 0.106911031 0.107400714 0.109620607 0.110810554 0.111891487 0.112547145 0.114860979 0.115658987 0.116312425 0.118646765 0.120326564 0.121026620 0.122848848 0.124244320 0.125201743 0.125914109 0.126279470 0.127042576 0.131971589 0.135031549 0.135750380 0.142740860 0.143557155 0.147012324 0.147379178 0.149684056 0.152497573 0.154773442 0.156189579 0.156708235 0.161555786 0.161854608 0.173509467 0.174034174 0.179836161 0.184235835 0.185440253 0.189494468 0.190296801 0.194047471 0.194213900 0.198344906 0.200143044 0.205227486 0.206897695 0.207268535 0.210146073 0.214479781 0.216442657 0.217812638 0.218469178 0.220689551 0.225207267 0.226247354 0.232122014 0.235078557 0.235466695 0.235911410 0.244571138 0.255996762 0.257241745 0.263591305 0.269833618 0.280348645 0.282942496 0.286290567 0.291575070 0.296702826 0.304329391 0.305717173 0.307280940 0.314093535 0.316685217 0.317373629 0.322120440 0.329724148 0.332802572 0.351789219 0.352135366 0.354869336 0.355760631 0.360090992 0.362779257 0.364077488 0.384384678 0.386079704 0.391939514 0.410667576 0.425563340 0.430858564 0.462240305 0.468654346 0.478231573 0.483618038 0.484232359 0.487620518 0.491370762 0.509499026 0.515262312 0.535215354 0.566390950 0.573413120 0.592307508 0.593724153 0.606416765 0.607973673 0.644662840 0.646872465 0.649178194 0.674275886 0.677781838 0.685518790 0.691720615 0.693508947 0.699912362 0.704404575 0.717292288 0.741249737 0.751230931 0.759034929 0.769122371 0.772630520 0.778778945 0.810864914 0.815271266 0.819419376 0.821639146 0.823467854 0.831548087 0.834483329 0.836013087 0.842162976 0.845692224 0.847456072 0.849441239 0.859013410 0.865887655 0.866603066 0.873940245 0.884028669 0.885509477 0.889610880 0.899334256 0.900856395 0.904046452 0.923397305 0.927201723 0.935007739 0.936810108 0.965966468 0.975880524 0.986043901 1.001146305 1.018400482 1.027984932 1.041716491 1.050776915 1.057501658 1.068645876 1.086613350 1.088677843 1.104351491 1.106413600 1.112345876 1.123843416 1.124785103 1.135866316 1.143797309 1.174425693 1.178746969 1.181060984 1.186512975 1.191340360 1.196188090 1.224530194 1.228323120 1.274823486 1.301784170 1.319511441 1.328129399 1.333050821 1.335496321 1.336247466 1.342423381 1.343052668 1.344977510 1.359050023 1.378688725 1.382896440 1.384264847 1.415537780 1.420213055 1.436380226 1.551475263 1.681525749 1.776046091</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">224</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34369854" y3="0.04422441" z3="-0.19443154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39108882" y3="0.15889552" z3="0.41158603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65067255" y3="0.43460686" z3="-0.34562185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72931166" y3="1.23294612" z3="-2.26130065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39061207" y3="0.42982547" z3="-1.18465155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72719133" y3="0.84514276" z3="-3.65804546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63308105" y3="1.74672069" z3="-3.13116666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37618205" y3="2.59163036" z3="-4.60356633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55735047" y3="1.25022936" z3="-4.36651711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49559326" y3="2.92787431" z3="-5.15975499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92459241" y3="-0.48559325" z3="-3.4408901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10070372" y3="0.04008486" z3="-1.00079109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40241034" y3="-1.1017817" z3="-2.00133282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93106962" y3="-0.97144982" z3="-1.82600629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10458881" y3="-2.42660883" z3="-1.85035551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.140476" y3="-3.61650148" z3="0.67346021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01204427" y3="-5.25549973" z3="-4.74252627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24068029" y3="-4.99884984" z3="-3.70463741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83838163" y3="-4.31049921" z3="-1.08483917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78385263" y3="-4.59025604" z3="-2.85271951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55627262" y3="-5.0902771" z3="-3.24651253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85591086" y3="-4.74095285" z3="-1.93212633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49699759" y3="-4.26069652" z3="-1.52649265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81706492" y3="-4.50978928" z3="-3.19979603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35466605" y3="-5.40467366" z3="-3.92187768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89283291" y3="-4.77930981" z3="-1.58835077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02851181" y3="-3.86154895" z3="0.23569752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16907335" y3="-3.64818858" z3="0.8802987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05643299" y3="-4.11203759" z3="0.4473315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16418879" y3="-3.51120994" z3="2.34719008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22217978" y3="-3.3251236" z3="5.14498712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35998222" y3="-3.7174221" z3="3.05056369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9971927" y3="-3.21753558" z3="3.06875373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02351661" y3="-3.12529212" z3="4.45736362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38791271" y3="-3.62671384" z3="4.43946565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27499462" y3="-3.95856692" z3="2.50224409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03773129" y3="-3.08248821" z3="2.56400875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09540816" y3="-2.91613293" z3="4.99584196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32586172" y3="-3.79856483" z3="4.97465977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24213851" y3="-3.26120458" z3="6.23655546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4172162" y3="-3.89515092" z3="-0.62292284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17612533" y3="-3.39284126" z3="-1.0767685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51816551" y3="0.24441851" z3="-4.70560556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07925733" y3="-1.72372954" z3="0.02116006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90493972" y3="-0.97129753" z3="1.18191046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8437728" y3="-0.3194057" z3="1.51477348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37387511" y3="0.56173465" z3="1.21605479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45418395" y3="1.45325834" z3="-0.41477389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98397639" y3="-0.68692581" z3="1.4033904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37001329" y3="1.76225629" z3="2.6542853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87997286" y3="-0.96197175" z3="2.07966862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65256822" y3="-0.34644158" z3="3.33771503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20380358" y3="0.76155671" z3="-1.23745406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30995173" y3="2.25329961" z3="-0.41063955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43943229" y3="1.92322247" z3="-0.58218071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01188925" y3="-1.04757774" z3="2.44518267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95530557" y3="-0.22149226" z3="1.16526664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86352592" y3="-1.53198159" z3="0.70617621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43116281" y3="1.22943824" z3="3.61959319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56617601" y3="2.34948487" z3="2.65355492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21148391" y3="2.47503098" z3="2.59558071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78984905" y3="-0.80109581" z3="3.85079607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56734646" y3="-0.52125446" z3="3.91940662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48346327" y3="0.73600051" z3="3.21633002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84421068" y3="-0.7126126" z3="0.98838701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41367854" y3="-2.03807231" z3="0.84852079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7590779" y3="-2.68274699" z3="1.89069036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5526834" y3="-1.98931464" z3="3.07970829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03623232" y3="-0.6992161" z3="3.27633983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69011996" y3="-0.06780343" z3="2.22300159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51709172" y3="-2.53567518" z3="-0.11727629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35914869" y3="-3.68985613" z3="1.76609488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68952829" y3="-2.58699383" z3="4.1033774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85617346" y3="-0.18945202" z3="4.22348844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03684496" y3="0.96277544" z3="2.33958497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79905642" y3="0.46292701" z3="-4.28132698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77770254" y3="-0.50563577" z3="-4.46225229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42831997" y3="-1.6958894" z3="-5.08780094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14165681" y3="-1.92457731" z3="-5.56597317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82970041" y3="-0.95318205" z3="-5.36493031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04491794" y3="1.3850053" z3="-3.74860011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79696867" y3="-0.36147677" z3="-4.10253327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43913039" y3="-2.74594879" z3="-5.23170486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08967351" y3="-2.86368532" z3="-6.06861255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85170258" y3="-1.13737677" z3="-5.69971251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36303989" y3="-1.89304306" z3="5.04631801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30878588" y3="-3.7266789" z3="3.93378752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21425438" y3="-3.64561999" z3="-6.01271598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44199062" y3="-2.66266653" z3="-4.55098202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07390196" y3="1.15757373" z3="-1.4940864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11208837" y3="1.54894587" z3="-2.47057836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44273403" y3="1.48600306" z3="-1.69348884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85163682" y3="2.15362791" z3="-2.82197777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16987102" y3="1.18552598" z3="-0.93280073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90791852" y3="2.39405101" z3="-2.96761883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57111456" y3="2.22056995" z3="-3.63789309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90292823" y3="2.51458392" z3="-3.80860358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84886766" y3="2.49458386" z3="-4.41044354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23337681" y3="3.02450053" z3="-4.71782489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40118156" y3="3.15090852" z3="-3.32494554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28350374" y3="3.56440155" z3="-4.10831122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2101934" y3="4.16127837" z3="-2.73157376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95907927" y3="5.49440013" z3="-2.95294465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04055798" y3="3.87156378" z3="-2.08574621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59705482" y3="6.24977226" z3="-2.48454585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05778991" y3="4.95086129" z3="-4.33082829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88029014" y3="5.89877323" z3="-3.77455738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2046432" y3="5.24932623" z3="-4.94792337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69611373" y3="6.96214397" z3="-3.95045447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47683863" y3="-2.20290881" z3="-0.29785853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4459749" y3="-2.99566046" z3="-1.06428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00551263" y3="-2.58523286" z3="0.59008767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09179962" y3="-1.38377314" z3="-0.71628014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17496364" y3="-1.42779423" z3="-1.1486642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31177802" y3="-0.38714161" z3="-1.49752943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09836914" y3="-1.55202754" z3="-0.94221366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4135195" y3="-2.08332092" z3="-1.99922962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3437,.0442,-.1944;7.3911,.1589,.4116;6.6507,.4346,-.3456;4.7293,1.2329,-2.2613;4.3906,.4298,-1.1847;2.7272,.8451,-3.658;3.6331,1.7467,-3.1312;1.3762,2.5916,-4.6036;1.5574,1.2502,-4.3665;.4956,2.9279,-5.1598;2.9246,-.4856,-3.4409;3.1007,.0401,-1.0008;2.4024,-1.1018,-2.0013;.9311,-.9714,-1.826;3.1046,-2.4266,-1.8504;-.1405,-3.6165,.6735;-.012,-5.2555,-4.7425;-.2407,-4.9988,-3.7046;-.8384,-4.3105,-1.0848;.7839,-4.5903,-2.8527;-1.5563,-5.0903,-3.2465;-1.8559,-4.741,-1.9321;.497,-4.2607,-1.5265;1.8171,-4.5098,-3.1998;-2.3547,-5.4047,-3.9219;-2.8928,-4.7793,-1.5884;-1.0285,-3.8615,.2357;-2.1691,-3.6482,.8803;-3.0564,-4.112,.4473;-2.1642,-3.5112,2.3472;-2.2222,-3.3251,5.145;-3.36,-3.7174,3.0506;-.9972,-3.2175,3.0688;-1.0235,-3.1253,4.4574;-3.3879,-3.6267,4.4395;-4.275,-3.9586,2.5022;-.0377,-3.0825,2.564;-.0954,-2.9161,4.9958;-4.3259,-3.7986,4.9747;-2.2421,-3.2612,6.2366;1.4172,-3.8952,-.6229;2.1761,-3.3928,-1.0768;.5182,.2444,-4.7056;-3.0793,-1.7237,.0212;-2.9049,-.9713,1.1819;-1.8438,-.3194,1.5148;-.3739,.5617,1.2161;-.4542,1.4533,-.4148;.984,-.6869,1.4034;-.37,1.7623,2.6543;-3.88,-.962,2.0797;-3.6526,-.3464,3.3377;-.2038,.7616,-1.2375;.31,2.2533,-.4106;-1.4394,1.9232,-.5822;1.0119,-1.0476,2.4452;1.9553,-.2215,1.1653;.8635,-1.532,.7062;-.4312,1.2294,3.6196;.5662,2.3495,2.6536;-1.2115,2.475,2.5956;-2.7898,-.8011,3.8508;-4.5673,-.5213,3.9194;-3.4835,.736,3.2163;4.8442,-.7126,.9884;4.4137,-2.0381,.8485;3.7591,-2.6827,1.8907;3.5527,-1.9893,3.0797;4.0362,-.6992,3.2763;4.6901,-.0678,2.223;4.5171,-2.5357,-.1173;3.3591,-3.6899,1.7661;2.6895,-2.587,4.1034;3.8562,-.1895,4.2235;5.0368,.9628,2.3396;-.7991,.4629,-4.2813;-1.7777,-.5056,-4.4623;-1.4283,-1.6959,-5.0878;-.1417,-1.9246,-5.566;.8297,-.9532,-5.3649;-1.0449,1.385,-3.7486;-2.797,-.3615,-4.1025;-2.4391,-2.7459,-5.2317;.0897,-2.8637,-6.0686;1.8517,-1.1374,-5.6997;2.363,-1.893,5.0463;2.3088,-3.7267,3.9338;-2.2143,-3.6456,-6.0127;-3.442,-2.6627,-4.551;7.0739,1.1576,-1.4941;6.1121,1.5489,-2.4706;8.4427,1.486,-1.6935;8.8516,2.1536,-2.822;9.1699,1.1855,-.9328;9.9079,2.3941,-2.9676;6.5711,2.2206,-3.6379;7.9029,2.5146,-3.8086;5.8489,2.4946,-4.4104;8.2334,3.0245,-4.7178;3.4012,3.1509,-3.3249;2.2835,3.5644,-4.1083;4.2102,4.1613,-2.7316;3.9591,5.4944,-2.9529;5.0406,3.8716,-2.0857;4.5971,6.2498,-2.4845;2.0578,4.9509,-4.3308;2.8803,5.8988,-3.7746;1.2046,5.2493,-4.9479;2.6961,6.9621,-3.9505;-4.4768,-2.2029,-.2979;-4.446,-2.9957,-1.0643;-5.0055,-2.5852,.5901;-5.0918,-1.3838,-.7163;-2.175,-1.4278,-1.1487;-2.3118,-.3871,-1.4975;-1.0984,-1.552,-.9422;-2.4135,-2.0833,-1.9992;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421239452</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001158179216 0.000212774185 0.021091545466 0.005307293837</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030648608 -0.000390071 0.000089842 0.000157506 0.000229489 0.000324115 0.000413212 0.000425247 0.000582030 0.000808389 0.000934856 0.001055681 0.001280506 0.001347543 0.001390802 0.001422573 0.001596246 0.001818526 0.001828684 0.001954662 0.002141357 0.002401482 0.002607525 0.002690493 0.002839612 0.002934109 0.003132696 0.003475632 0.003742124 0.003952213 0.004446645 0.004709753 0.004804904 0.005092566 0.006036940 0.006075469 0.006181140 0.006617240 0.006930869 0.007626583 0.008103923 0.008230883 0.009259112 0.009563526 0.010007978 0.010686945 0.011027765 0.011358015 0.011735352 0.012237916 0.012918431 0.013151922 0.014022054 0.014568767 0.015122883 0.015460455 0.015715123 0.016246468 0.016927678 0.017477230 0.018108721 0.018212917 0.019408519 0.019561777 0.019998031 0.020805958 0.021214985 0.021439891 0.022562853 0.023139588 0.025169026 0.026059897 0.026794200 0.026995304 0.027610705 0.029311402 0.029537904 0.031423225 0.033296122 0.033500165 0.033916623 0.035796881 0.036868384 0.037651615 0.039603521 0.040000668 0.040798696 0.042307211 0.044297569 0.045155495 0.045462923 0.046966315 0.047725666 0.049210073 0.050349258 0.050844872 0.051076332 0.051274692 0.052478976 0.052634526 0.052886811 0.053049839 0.054711175 0.054903066 0.055902635 0.056239244 0.056497860 0.056615608 0.057067101 0.058447081 0.060326861 0.060831919 0.061680612 0.062125658 0.063261403 0.064413399 0.065172716 0.065897833 0.066438774 0.067850559 0.068975184 0.070243168 0.072714891 0.074461997 0.074699336 0.076203427 0.078215061 0.083626028 0.085414761 0.087000467 0.087279735 0.088111610 0.090417087 0.090956730 0.092997276 0.094602602 0.095371568 0.096404372 0.097465876 0.097921402 0.098881137 0.099966337 0.100357895 0.102428484 0.103181687 0.103382217 0.103708735 0.104235724 0.105840243 0.106910430 0.107395352 0.109623533 0.110812315 0.111890022 0.112547954 0.114860814 0.115670426 0.116312981 0.118649645 0.120324155 0.121024897 0.122857406 0.124249745 0.125221868 0.125932153 0.126280424 0.127041405 0.131972004 0.135031006 0.135753240 0.142743807 0.143557629 0.147014485 0.147391542 0.149686600 0.152496867 0.154746506 0.156192982 0.156706075 0.161544380 0.161850375 0.173517521 0.174033665 0.179841503 0.184252623 0.185476292 0.189498516 0.190299438 0.194058155 0.194223178 0.198344908 0.200143764 0.205227360 0.206898308 0.207273548 0.210154097 0.214508192 0.216451977 0.217814138 0.218490409 0.220685470 0.225207952 0.226250677 0.232127938 0.235082635 0.235470241 0.235911616 0.244570554 0.255997725 0.257242798 0.263597181 0.269834866 0.280349358 0.282943480 0.286293762 0.291577350 0.296702101 0.304329662 0.305717170 0.307281858 0.314112437 0.316684974 0.317374077 0.322122340 0.329723916 0.332802906 0.351775249 0.352138637 0.354870236 0.355759791 0.360077410 0.362779421 0.364085497 0.384380256 0.386068377 0.391938554 0.410666348 0.425565908 0.430867198 0.462247849 0.468654518 0.478233145 0.483619145 0.484240227 0.487624183 0.491375565 0.509500975 0.515264127 0.535214150 0.566405218 0.573421998 0.592313185 0.593730430 0.606416965 0.607978859 0.644660788 0.646872863 0.649205981 0.674268227 0.677783706 0.685528553 0.691755437 0.693505033 0.699920921 0.704404553 0.717293505 0.741251590 0.751231118 0.759042916 0.769148341 0.772632573 0.778778743 0.810866753 0.815279289 0.819430886 0.821638860 0.823463495 0.831549209 0.834491930 0.836015314 0.842169102 0.845694776 0.847460785 0.849452448 0.859018373 0.865887491 0.866602269 0.873942598 0.884055124 0.885546168 0.889612943 0.899343539 0.900859826 0.904047266 0.923397310 0.927214485 0.935016230 0.936815806 0.965973490 0.975883503 0.986044256 1.001146246 1.018409504 1.027985553 1.041716384 1.050783296 1.057502058 1.068646505 1.086616470 1.088681319 1.104363640 1.106422182 1.112350075 1.123856275 1.124841671 1.135872574 1.143796904 1.174441563 1.178752084 1.181065069 1.186519089 1.191354398 1.196190594 1.224542077 1.228328911 1.274828723 1.301782166 1.319509980 1.328131238 1.333049697 1.335496964 1.336247363 1.342420516 1.343063724 1.344978786 1.359047999 1.378690906 1.382896851 1.384266888 1.415557811 1.420235808 1.436360016 1.551475398 1.681541016 1.776029685</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">225</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34198704" y3="0.04030244" z3="-0.19345766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38848387" y3="0.15800101" z3="0.41412816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64810836" y3="0.43305328" z3="-0.34334358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7266162" y3="1.23106662" z3="-2.25898785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38890242" y3="0.42538369" z3="-1.18386253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72493615" y3="0.84264371" z3="-3.65699507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62944312" y3="1.74476443" z3="-3.12786991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37091561" y3="2.5895658" z3="-4.59788617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55434607" y3="1.24727202" z3="-4.36488444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48977337" y3="2.92576778" z3="-5.1531422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92443006" y3="-0.48813568" z3="-3.44252377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09958202" y3="0.03290602" z3="-1.00142325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40393991" y3="-1.10868898" z3="-2.00420563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93232943" y3="-0.98203314" z3="-1.82833583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10880133" y3="-2.43234357" z3="-1.85562036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13783804" y3="-3.61163428" z3="0.67074658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0113379" y3="-5.26337804" z3="-4.74233718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23967888" y3="-5.00379391" z3="-3.70504666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83744026" y3="-4.30743653" z3="-1.08671215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78532976" y3="-4.59621622" z3="-2.8532915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55626568" y3="-5.08962248" z3="-3.24730911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85596875" y3="-4.73619989" z3="-1.93398104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.498472" y3="-4.26297698" z3="-1.5279431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81796444" y3="-4.51707644" z3="-3.19948835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35595425" y3="-5.40263535" z3="-3.92243931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89235859" y3="-4.77279877" z3="-1.59128571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02655965" y3="-3.85605212" z3="0.23323053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16651161" y3="-3.6442417" z3="0.8788167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05375762" y3="-4.10807823" z3="0.4455195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16151141" y3="-3.50731275" z3="2.34557105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22079581" y3="-3.31838221" z3="5.14306687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35778017" y3="-3.71187603" z3="3.04903167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99474726" y3="-3.21428194" z3="3.06698742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02164768" y3="-3.1208528" z3="4.45542457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3867582" y3="-3.61921086" z3="4.43761719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27236092" y3="-3.95355399" z3="2.5010481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03565408" y3="-3.07993644" z3="2.56241763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09192182" y3="-2.91481821" z3="4.99415139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32497709" y3="-3.78986511" z3="4.97277976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24149359" y3="-3.25292921" z3="6.23440842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41958127" y3="-3.89844185" z3="-0.62474378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17965821" y3="-3.39854024" z3="-1.07934188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51591973" y3="0.24117122" z3="-4.70561857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07833773" y3="-1.7191332" z3="0.02057588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90076227" y3="-0.96574442" z3="1.18018498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83927795" y3="-0.31300365" z3="1.50942604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36777023" y3="0.56525425" z3="1.20717434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44575936" y3="1.4507773" z3="-0.42698115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98732796" y3="-0.68533889" z3="1.40100351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36396573" y3="1.77234858" z3="2.6395616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87331734" y3="-0.95542681" z3="2.08072624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6422129" y3="-0.3389691" z3="3.33742586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19709545" y3="0.75602391" z3="-1.24756582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31909294" y3="2.24969574" z3="-0.42498721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43043801" y3="1.92250312" z3="-0.59573214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01167985" y3="-1.04316061" z3="2.44372272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96137674" y3="-0.22385798" z3="1.16349299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8663401" y3="-1.53210182" z3="0.70606376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42945842" y3="1.2442277" z3="3.60749627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57399869" y3="2.35710989" z3="2.63825654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20334022" y3="2.48772627" z3="2.57448916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77944793" y3="-0.7945386" z3="3.84905785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55613096" y3="-0.51156896" z3="3.92144366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47118769" y3="0.74325159" z3="3.21483328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84328047" y3="-0.71820721" z3="0.98856705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41257576" y3="-2.0434252" z3="0.84757468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75842667" y3="-2.68911749" z3="1.88939906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55259519" y3="-1.99695556" z3="3.07907503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03668451" y3="-0.7072987" z3="3.27692605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69002217" y3="-0.07483496" z3="2.22390397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51528905" y3="-2.53993858" z3="-0.11896635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35837627" y3="-3.69606671" z3="1.76401964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69027914" y3="-2.5955777" z3="4.10290381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85698865" y3="-0.19858139" z3="4.22450941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03649838" y3="0.95555628" z3="2.3410784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80246078" y3="0.4582304" z3="-4.28206195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78010321" y3="-0.51102122" z3="-4.46189317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42908933" y3="-1.70138735" z3="-5.089111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14157104" y3="-1.92876535" z3="-5.56536494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82882325" y3="-0.95592399" z3="-5.36265773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05016537" y3="1.38016292" z3="-3.74946886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79958927" y3="-0.36742372" z3="-4.10306976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43851294" y3="-2.75240696" z3="-5.23074928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09154749" y3="-2.86785675" z3="-6.06732116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85125673" y3="-1.13897471" z3="-5.69738139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36755414" y3="-1.9034163" z3="5.04897416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30715409" y3="-3.7340958" z3="3.93110856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21230876" y3="-3.65238783" z3="-6.01066633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4418692" y3="-2.67006452" z3="-4.55013261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0706598" y3="1.15858337" z3="-1.49048036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.108898" y3="1.54983456" z3="-2.46701184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43892823" y3="1.49030338" z3="-1.68811753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84730479" y3="2.15982881" z3="-2.81535136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1661882" y3="1.19143125" z3="-0.92681206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90378563" y3="2.4062876" z3="-2.95871949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56758709" y3="2.2241503" z3="-3.63288187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89860066" y3="2.51991109" z3="-3.8023049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84557006" y3="2.4985135" z3="-4.40544935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22881689" y3="3.03319656" z3="-4.71014544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39563541" y3="3.14884644" z3="-3.31878279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27689671" y3="3.5625741" z3="-4.10052247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20406332" y3="4.15848985" z3="-2.72448903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95035696" y3="5.49207908" z3="-2.94204691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03554764" y3="3.86838789" z3="-2.08024627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58849724" y3="6.24633596" z3="-2.47374751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04886691" y3="4.94912439" z3="-4.31958932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86988556" y3="5.89724163" z3="-3.76117273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19465369" y3="5.24787286" z3="-4.93509231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6831094" y3="6.96114913" z3="-3.93349643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47737806" y3="-2.19726314" z3="-0.29490031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44986499" y3="-2.99106969" z3="-1.06092934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00436451" y3="-2.57772933" z3="0.59482098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09305048" y3="-1.37805057" z3="-0.71277325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17674478" y3="-1.42490368" z3="-1.15180132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31596373" y3="-0.38587999" z3="-1.5016845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1001042" y3="-1.54829512" z3="-0.94823502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41891535" y3="-2.08113367" z3="-2.00180913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.342,.0403,-.1935;7.3885,.158,.4141;6.6481,.4331,-.3433;4.7266,1.2311,-2.259;4.3889,.4254,-1.1839;2.7249,.8426,-3.657;3.6294,1.7448,-3.1279;1.3709,2.5896,-4.5979;1.5543,1.2473,-4.3649;.4898,2.9258,-5.1531;2.9244,-.4881,-3.4425;3.0996,.0329,-1.0014;2.4039,-1.1087,-2.0042;.9323,-.982,-1.8283;3.1088,-2.4323,-1.8556;-.1378,-3.6116,.6707;-.0113,-5.2634,-4.7423;-.2397,-5.0038,-3.705;-.8374,-4.3074,-1.0867;.7853,-4.5962,-2.8533;-1.5563,-5.0896,-3.2473;-1.856,-4.7362,-1.934;.4985,-4.263,-1.5279;1.818,-4.5171,-3.1995;-2.356,-5.4026,-3.9224;-2.8924,-4.7728,-1.5913;-1.0266,-3.8561,.2332;-2.1665,-3.6442,.8788;-3.0538,-4.1081,.4455;-2.1615,-3.5073,2.3456;-2.2208,-3.3184,5.1431;-3.3578,-3.7119,3.049;-.9947,-3.2143,3.067;-1.0216,-3.1209,4.4554;-3.3868,-3.6192,4.4376;-4.2724,-3.9536,2.501;-.0357,-3.0799,2.5624;-.0919,-2.9148,4.9942;-4.325,-3.7899,4.9728;-2.2415,-3.2529,6.2344;1.4196,-3.8984,-.6247;2.1797,-3.3985,-1.0793;.5159,.2412,-4.7056;-3.0783,-1.7191,.0206;-2.9008,-.9657,1.1802;-1.8393,-.313,1.5094;-.3678,.5653,1.2072;-.4458,1.4508,-.427;.9873,-.6853,1.401;-.364,1.7723,2.6396;-3.8733,-.9554,2.0807;-3.6422,-.339,3.3374;-.1971,.756,-1.2476;.3191,2.2497,-.425;-1.4304,1.9225,-.5957;1.0117,-1.0432,2.4437;1.9614,-.2239,1.1635;.8663,-1.5321,.7061;-.4295,1.2442,3.6075;.574,2.3571,2.6383;-1.2033,2.4877,2.5745;-2.7794,-.7945,3.8491;-4.5561,-.5116,3.9214;-3.4712,.7433,3.2148;4.8433,-.7182,.9886;4.4126,-2.0434,.8476;3.7584,-2.6891,1.8894;3.5526,-1.997,3.0791;4.0367,-.7073,3.2769;4.69,-.0748,2.2239;4.5153,-2.5399,-.119;3.3584,-3.6961,1.764;2.6903,-2.5956,4.1029;3.857,-.1986,4.2245;5.0365,.9556,2.3411;-.8025,.4582,-4.2821;-1.7801,-.511,-4.4619;-1.4291,-1.7014,-5.0891;-.1416,-1.9288,-5.5654;.8288,-.9559,-5.3627;-1.0502,1.3802,-3.7495;-2.7996,-.3674,-4.1031;-2.4385,-2.7524,-5.2307;.0915,-2.8679,-6.0673;1.8513,-1.139,-5.6974;2.3676,-1.9034,5.049;2.3072,-3.7341,3.9311;-2.2123,-3.6524,-6.0107;-3.4419,-2.6701,-4.5501;7.0707,1.1586,-1.4905;6.1089,1.5498,-2.467;8.4389,1.4903,-1.6881;8.8473,2.1598,-2.8154;9.1662,1.1914,-.9268;9.9038,2.4063,-2.9587;6.5676,2.2242,-3.6329;7.8986,2.5199,-3.8023;5.8456,2.4985,-4.4054;8.2288,3.0332,-4.7101;3.3956,3.1488,-3.3188;2.2769,3.5626,-4.1005;4.2041,4.1585,-2.7245;3.9504,5.4921,-2.942;5.0355,3.8684,-2.0802;4.5885,6.2463,-2.4737;2.0489,4.9491,-4.3196;2.8699,5.8972,-3.7612;1.1947,5.2479,-4.9351;2.6831,6.9611,-3.9335;-4.4774,-2.1973,-.2949;-4.4499,-2.9911,-1.0609;-5.0044,-2.5777,.5948;-5.0931,-1.3781,-.7128;-2.1767,-1.4249,-1.1518;-2.316,-.3859,-1.5017;-1.1001,-1.5483,-.9482;-2.4189,-2.0811,-2.0018;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416511247</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001557936955 0.000239859259 0.021928644077 0.005336253158</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030648720 -0.000345750 0.000115808 0.000147991 0.000225146 0.000326780 0.000416044 0.000427552 0.000584349 0.000807369 0.000934235 0.001063547 0.001280777 0.001350531 0.001391981 0.001422675 0.001599346 0.001821325 0.001831722 0.001959364 0.002145796 0.002408903 0.002609225 0.002688588 0.002851841 0.002961964 0.003131976 0.003475867 0.003741471 0.003954354 0.004451210 0.004710152 0.004807169 0.005093602 0.006038867 0.006075999 0.006180856 0.006617542 0.006939044 0.007643841 0.008103901 0.008232506 0.009261698 0.009564501 0.010008841 0.010697662 0.011028852 0.011356719 0.011739451 0.012238628 0.012918390 0.013156876 0.014022410 0.014569580 0.015124039 0.015464137 0.015714426 0.016246931 0.016927855 0.017477573 0.018108331 0.018227914 0.019408534 0.019563687 0.019997963 0.020805970 0.021215068 0.021441748 0.022565723 0.023139670 0.025169355 0.026062829 0.026795106 0.026995102 0.027631858 0.029320417 0.029545320 0.031426145 0.033296253 0.033499890 0.033919107 0.035796396 0.036869444 0.037653761 0.039602572 0.040005951 0.040805781 0.042312506 0.044297275 0.045168617 0.045462928 0.046969801 0.047728421 0.049211278 0.050350157 0.050847807 0.051079396 0.051276546 0.052478958 0.052636963 0.052888027 0.053055159 0.054713219 0.054903478 0.055903038 0.056240765 0.056497690 0.056619582 0.057071612 0.058449583 0.060329752 0.060833804 0.061686172 0.062126817 0.063261901 0.064416134 0.065174176 0.065900359 0.066439504 0.067851193 0.068983528 0.070245524 0.072716818 0.074461749 0.074705218 0.076203372 0.078237928 0.083626020 0.085433763 0.087019370 0.087283328 0.088118262 0.090418773 0.090956662 0.092997002 0.094602583 0.095372807 0.096407322 0.097506387 0.097929843 0.098880904 0.099966484 0.100360111 0.102429602 0.103186113 0.103387661 0.103714787 0.104248962 0.105842533 0.106910417 0.107395340 0.109635584 0.110814623 0.111890168 0.112548815 0.114860766 0.115689520 0.116317710 0.118652567 0.120324146 0.121025097 0.122869015 0.124255315 0.125240025 0.125939255 0.126282332 0.127041275 0.131972239 0.135030679 0.135756645 0.142747978 0.143560364 0.147018677 0.147410302 0.149690586 0.152499115 0.154746378 0.156197028 0.156705391 0.161543811 0.161850454 0.173525926 0.174036270 0.179846676 0.184270176 0.185527355 0.189506786 0.190302215 0.194070862 0.194236627 0.198346106 0.200143844 0.205227915 0.206898604 0.207276506 0.210162595 0.214527572 0.216459233 0.217814983 0.218521564 0.220685481 0.225210092 0.226258889 0.232132050 0.235083874 0.235472560 0.235911569 0.244570753 0.255998029 0.257243472 0.263605582 0.269836377 0.280350853 0.282943638 0.286295729 0.291579654 0.296704690 0.304329778 0.305717236 0.307281858 0.314145446 0.316685267 0.317374065 0.322123273 0.329727495 0.332803417 0.351776274 0.352140923 0.354876668 0.355759783 0.360077385 0.362780160 0.364092348 0.384404436 0.386068616 0.391938446 0.410668331 0.425570464 0.430876367 0.462250110 0.468654656 0.478237482 0.483621255 0.484243851 0.487627459 0.491379215 0.509509811 0.515267617 0.535214930 0.566440031 0.573434246 0.592315471 0.593735389 0.606416936 0.607998498 0.644661882 0.646873086 0.649248459 0.674268696 0.677786767 0.685542577 0.691815301 0.693508187 0.699946550 0.704405340 0.717296328 0.741255724 0.751232456 0.759058812 0.769198200 0.772636607 0.778779613 0.810874066 0.815286358 0.819461531 0.821639133 0.823463558 0.831549504 0.834491952 0.836019243 0.842175610 0.845699463 0.847466263 0.849469429 0.859026497 0.865888138 0.866606376 0.873944752 0.884155790 0.885597674 0.889624321 0.899347222 0.900879929 0.904048967 0.923397304 0.927240286 0.935046953 0.936836242 0.965993893 0.975887061 0.986044796 1.001146351 1.018441910 1.027988827 1.041717080 1.050796470 1.057502768 1.068654037 1.086619684 1.088682247 1.104383832 1.106437798 1.112358761 1.123867594 1.125022590 1.135881603 1.143796897 1.174462934 1.178752465 1.181078789 1.186541670 1.191356264 1.196194485 1.224562342 1.228333190 1.274837739 1.301783726 1.319510701 1.328132280 1.333050641 1.335518672 1.336247213 1.342423838 1.343074935 1.344983130 1.359049532 1.378691077 1.382898405 1.384292238 1.415559456 1.420251916 1.436369821 1.551475358 1.681550520 1.776064948</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">226</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33946491" y3="0.03946499" z3="-0.19146485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38464469" y3="0.16300419" z3="0.41933478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64465619" y3="0.43663317" z3="-0.33899932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72367791" y3="1.23019381" z3="-2.25679203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38659071" y3="0.42288671" z3="-1.18278822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72437122" y3="0.83897095" z3="-3.65729467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62663779" y3="1.74215122" z3="-3.12669478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36975631" y3="2.58362637" z3="-4.60053085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55401466" y3="1.24245083" z3="-4.3659244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48899622" y3="2.91866054" z3="-5.15717656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9262104" y3="-0.49185654" z3="-3.44386359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09793152" y3="0.02779161" z3="-1.00215084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40439252" y3="-1.11374385" z3="-2.00662529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93237481" y3="-0.98822728" z3="-1.83280445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10999199" y3="-2.43684548" z3="-1.85742176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13816365" y3="-3.60619915" z3="0.66921921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01533226" y3="-5.26912079" z3="-4.7405822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24295667" y3="-5.00733291" z3="-3.70371029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83820702" y3="-4.30521837" z3="-1.08672873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78307294" y3="-4.60023425" z3="-2.85300112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55907299" y3="-5.09061374" z3="-3.24554068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85747738" y3="-4.73390328" z3="-1.93284198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49752506" y3="-4.26438419" z3="-1.52802686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81698102" y3="-4.52657" z3="-3.20007638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35899401" y3="-5.4038467" z3="-3.91978064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89483764" y3="-4.76531489" z3="-1.58967111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02687436" y3="-3.85117132" z3="0.23239237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16680676" y3="-3.63800108" z3="0.87791079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05431891" y3="-4.1016948" z3="0.44514405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16205831" y3="-3.5009649" z3="2.34463999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22017894" y3="-3.31690458" z3="5.14253996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35896077" y3="-3.70329654" z3="3.04732075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99438155" y3="-3.21210274" z3="3.0668638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02086182" y3="-3.12059758" z3="4.45554486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38707277" y3="-3.6134771" z3="4.43624742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27454225" y3="-3.94089791" z3="2.49837904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03408433" y3="-3.08130946" z3="2.56257479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09178054" y3="-2.91601122" z3="4.99481632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32560307" y3="-3.7828584" z3="4.97085675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24002343" y3="-3.25384182" z3="6.23419954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41988488" y3="-3.90140702" z3="-0.62541748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18000567" y3="-3.40278444" z3="-1.08057725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51646772" y3="0.23552194" z3="-4.70763446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07924786" y3="-1.71274134" z3="0.01984883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89758245" y3="-0.95880726" z3="1.17838544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83360122" y3="-0.30832141" z3="1.50451258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35932562" y3="0.56409746" z3="1.20278712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43353003" y3="1.44979223" z3="-0.4314432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99067847" y3="-0.69196451" z3="1.3963594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34956159" y3="1.77085936" z3="2.6356991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86802461" y3="-0.94566087" z3="2.08116621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63138739" y3="-0.33084502" z3="3.33799413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19388933" y3="0.75207671" z3="-1.25204337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34102158" y3="2.23994761" z3="-0.43297733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41321942" y3="1.9311596" z3="-0.59767301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01349058" y3="-1.05172368" z3="2.43853264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96477458" y3="-0.23189951" z3="1.1603591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86731183" y3="-1.53672729" z3="0.69921995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40970851" y3="1.24254104" z3="3.60327566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58767197" y3="2.35645751" z3="2.63065777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18981715" y3="2.48468306" z3="2.57545819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76760896" y3="-0.7886262" z3="3.84642785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54350041" y3="-0.50210227" z3="3.92492091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45893974" y3="0.75074985" z3="3.21551789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84192584" y3="-0.72093719" z3="0.98977727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41169339" y3="-2.04629856" z3="0.84745352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75866315" y3="-2.6935188" z3="1.88902115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55345924" y3="-2.00268449" z3="3.07978818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03730363" y3="-0.71300956" z3="3.27894192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68965283" y3="-0.07909391" z3="2.22622184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5141106" y3="-2.5418261" z3="-0.11954456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35873106" y3="-3.70051402" z3="1.76261216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69132013" y3="-2.60240695" z3="4.10312101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85847096" y3="-0.20543975" z3="4.22759296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03630025" y3="0.95134413" z3="2.34477141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80153557" y3="0.45423559" z3="-4.28632803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77981297" y3="-0.51447179" z3="-4.46907302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42918737" y3="-1.70512928" z3="-5.09325705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14178081" y3="-1.93401761" z3="-5.56862268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82925712" y3="-0.96233861" z3="-5.36611785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04850099" y3="1.37654641" z3="-3.75482704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79958547" y3="-0.37013187" z3="-4.11121371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43980775" y3="-2.75525987" z3="-5.2372591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.090516" y3="-2.87345038" z3="-6.07040163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8518422" y3="-1.14639698" z3="-5.69907178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36558087" y3="-1.91011345" z3="5.04752024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31065636" y3="-3.74169663" z3="3.93198184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21369606" y3="-3.65659123" z3="-6.01617436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44374005" y3="-2.67090353" z3="-4.55822226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06682444" y3="1.16460654" z3="-1.48471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10532081" y3="1.55335583" z3="-2.46249262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4343474" y3="1.50103818" z3="-1.67986235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84245079" y3="2.17362781" z3="-2.80578058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16110906" y3="1.20274263" z3="-0.9179886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89767495" y3="2.41983963" z3="-2.94829072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5635711" y3="2.23008247" z3="-3.62717941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89424427" y3="2.53155683" z3="-3.79398827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84165618" y3="2.50202324" z3="-4.40078352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22418756" y3="3.0446562" z3="-4.70139274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39030244" y3="3.14613171" z3="-3.31645806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27300193" y3="3.55801356" z3="-4.10105262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19403109" y3="4.15771417" z3="-2.71748298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93856709" y3="5.49047748" z3="-2.93493293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02382264" y3="3.86904399" z3="-2.07053602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57229938" y3="6.24680839" z3="-2.46193226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04285471" y3="4.94430456" z3="-4.31964213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86036108" y3="5.89349393" z3="-3.75791625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19001619" y3="5.24166636" z3="-4.93765595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67268928" y3="6.95667422" z3="-3.93057298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47922379" y3="-2.19041866" z3="-0.29099524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45365912" y3="-2.9859589" z3="-1.05481176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00425582" y3="-2.56842051" z3="0.60107384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09490484" y3="-1.3717863" z3="-0.70956767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18015596" y3="-1.42088022" z3="-1.15502947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31575614" y3="-0.38009928" z3="-1.50449353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10283436" y3="-1.5479983" z3="-0.95367355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42478008" y3="-2.07709368" z3="-2.00343077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3395,.0395,-.1915;7.3846,.163,.4193;6.6447,.4366,-.339;4.7237,1.2302,-2.2568;4.3866,.4229,-1.1828;2.7244,.839,-3.6573;3.6266,1.7422,-3.1267;1.3698,2.5836,-4.6005;1.554,1.2425,-4.3659;.489,2.9187,-5.1572;2.9262,-.4919,-3.4439;3.0979,.0278,-1.0022;2.4044,-1.1137,-2.0066;.9324,-.9882,-1.8328;3.11,-2.4368,-1.8574;-.1382,-3.6062,.6692;-.0153,-5.2691,-4.7406;-.243,-5.0073,-3.7037;-.8382,-4.3052,-1.0867;.7831,-4.6002,-2.853;-1.5591,-5.0906,-3.2455;-1.8575,-4.7339,-1.9328;.4975,-4.2644,-1.528;1.817,-4.5266,-3.2001;-2.359,-5.4038,-3.9198;-2.8948,-4.7653,-1.5897;-1.0269,-3.8512,.2324;-2.1668,-3.638,.8779;-3.0543,-4.1017,.4451;-2.1621,-3.501,2.3446;-2.2202,-3.3169,5.1425;-3.359,-3.7033,3.0473;-.9944,-3.2121,3.0669;-1.0209,-3.1206,4.4555;-3.3871,-3.6135,4.4362;-4.2745,-3.9409,2.4984;-.0341,-3.0813,2.5626;-.0918,-2.916,4.9948;-4.3256,-3.7829,4.9709;-2.24,-3.2538,6.2342;1.4199,-3.9014,-.6254;2.18,-3.4028,-1.0806;.5165,.2355,-4.7076;-3.0792,-1.7127,.0198;-2.8976,-.9588,1.1784;-1.8336,-.3083,1.5045;-.3593,.5641,1.2028;-.4335,1.4498,-.4314;.9907,-.692,1.3964;-.3496,1.7709,2.6357;-3.868,-.9457,2.0812;-3.6314,-.3308,3.338;-.1939,.7521,-1.252;.341,2.2399,-.433;-1.4132,1.9312,-.5977;1.0135,-1.0517,2.4385;1.9648,-.2319,1.1604;.8673,-1.5367,.6992;-.4097,1.2425,3.6033;.5877,2.3565,2.6307;-1.1898,2.4847,2.5755;-2.7676,-.7886,3.8464;-4.5435,-.5021,3.9249;-3.4589,.7507,3.2155;4.8419,-.7209,.9898;4.4117,-2.0463,.8475;3.7587,-2.6935,1.889;3.5535,-2.0027,3.0798;4.0373,-.713,3.2789;4.6897,-.0791,2.2262;4.5141,-2.5418,-.1195;3.3587,-3.7005,1.7626;2.6913,-2.6024,4.1031;3.8585,-.2054,4.2276;5.0363,.9513,2.3448;-.8015,.4542,-4.2863;-1.7798,-.5145,-4.4691;-1.4292,-1.7051,-5.0933;-.1418,-1.934,-5.5686;.8293,-.9623,-5.3661;-1.0485,1.3765,-3.7548;-2.7996,-.3701,-4.1112;-2.4398,-2.7553,-5.2373;.0905,-2.8735,-6.0704;1.8518,-1.1464,-5.6991;2.3656,-1.9101,5.0475;2.3107,-3.7417,3.932;-2.2137,-3.6566,-6.0162;-3.4437,-2.6709,-4.5582;7.0668,1.1646,-1.4847;6.1053,1.5534,-2.4625;8.4343,1.501,-1.6799;8.8425,2.1736,-2.8058;9.1611,1.2027,-.918;9.8977,2.4198,-2.9483;6.5636,2.2301,-3.6272;7.8942,2.5316,-3.794;5.8417,2.502,-4.4008;8.2242,3.0447,-4.7014;3.3903,3.1461,-3.3165;2.273,3.558,-4.1011;4.194,4.1577,-2.7175;3.9386,5.4905,-2.9349;5.0238,3.869,-2.0705;4.5723,6.2468,-2.4619;2.0429,4.9443,-4.3196;2.8604,5.8935,-3.7579;1.19,5.2417,-4.9377;2.6727,6.9567,-3.9306;-4.4792,-2.1904,-.291;-4.4537,-2.986,-1.0548;-5.0043,-2.5684,.6011;-5.0949,-1.3718,-.7096;-2.1802,-1.4209,-1.155;-2.3158,-.3801,-1.5045;-1.1028,-1.548,-.9537;-2.4248,-2.0771,-2.0034;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417085330</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001585634522 0.000252506684 0.019519890716 0.005335702875</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030649811 -0.000890114 -0.000032304 0.000161951 0.000239724 0.000326841 0.000407726 0.000421412 0.000588191 0.000808584 0.000929331 0.001053091 0.001270024 0.001342709 0.001381713 0.001419701 0.001568291 0.001822151 0.001848085 0.001960681 0.002161967 0.002404639 0.002621230 0.002673582 0.002832152 0.002979376 0.003131226 0.003470578 0.003675330 0.003934022 0.004451558 0.004710658 0.004817430 0.005083619 0.006020203 0.006079223 0.006160409 0.006607225 0.006943496 0.007671878 0.008106391 0.008229993 0.009267195 0.009544426 0.010008857 0.010649102 0.011003475 0.011105546 0.011707475 0.012210014 0.012910383 0.013145124 0.014021484 0.014558676 0.015124787 0.015470183 0.015713282 0.016247662 0.016923924 0.017480756 0.018108597 0.018258555 0.019405758 0.019568378 0.019981380 0.020804938 0.021217226 0.021415290 0.022570791 0.023138062 0.025132056 0.026046398 0.026793756 0.026986057 0.027656905 0.029342921 0.029550996 0.031428236 0.033292176 0.033497937 0.033928500 0.035787780 0.036874449 0.037657065 0.039599155 0.040021051 0.040815325 0.042319875 0.044287696 0.045177293 0.045462996 0.046965502 0.047745329 0.049213336 0.050353623 0.050852759 0.051083871 0.051281332 0.052478726 0.052639724 0.052890403 0.053073018 0.054707338 0.054904988 0.055906417 0.056246572 0.056497501 0.056634699 0.057079460 0.058459145 0.060333036 0.060846376 0.061688868 0.062128410 0.063262532 0.064421270 0.065182742 0.065906556 0.066434655 0.067854455 0.068997355 0.070248870 0.072716599 0.074455481 0.074709953 0.076200481 0.078260046 0.083626175 0.085477010 0.087041306 0.087295985 0.088126185 0.090422678 0.090958029 0.092997448 0.094602672 0.095381267 0.096408398 0.097570659 0.097943575 0.098878628 0.099968064 0.100365916 0.102432246 0.103187143 0.103391359 0.103736736 0.104271132 0.105848762 0.106910771 0.107398151 0.109659887 0.110817838 0.111891881 0.112550406 0.114858566 0.115758621 0.116317900 0.118655742 0.120333046 0.121033859 0.122879711 0.124258876 0.125269005 0.125982913 0.126285864 0.127043759 0.131978317 0.135033981 0.135763916 0.142760238 0.143563009 0.147027096 0.147441714 0.149695056 0.152506761 0.154705420 0.156181986 0.156704273 0.161528295 0.161845355 0.173533456 0.174042343 0.179866264 0.184292264 0.185615632 0.189522555 0.190300620 0.194077944 0.194281508 0.198347660 0.200144323 0.205196567 0.206899162 0.207284820 0.210173402 0.214550064 0.216480041 0.217812048 0.218586687 0.220684447 0.225220429 0.226267711 0.232135751 0.235082585 0.235474076 0.235912636 0.244569616 0.255998739 0.257244503 0.263611185 0.269838092 0.280353395 0.282943961 0.286297614 0.291582810 0.296704810 0.304330560 0.305719680 0.307283401 0.314173570 0.316684918 0.317373962 0.322123903 0.329734787 0.332803706 0.351777052 0.352146675 0.354897398 0.355760158 0.360058866 0.362780785 0.364095161 0.384411006 0.386028092 0.391936178 0.410656966 0.425576441 0.430881481 0.462259042 0.468654604 0.478247498 0.483625798 0.484244457 0.487626326 0.491390536 0.509515608 0.515269816 0.535214546 0.566527268 0.573439343 0.592314611 0.593750605 0.606416303 0.608013791 0.644659943 0.646875013 0.649286917 0.674262026 0.677792713 0.685566370 0.691848904 0.693487742 0.699984908 0.704406666 0.717304259 0.741259829 0.751233829 0.759086584 0.769267756 0.772642923 0.778780616 0.810899302 0.815298469 0.819514001 0.821639139 0.823462457 0.831550761 0.834494619 0.836022299 0.842197535 0.845704171 0.847469977 0.849483096 0.859025996 0.865888391 0.866614263 0.873947241 0.884245904 0.885633630 0.889642678 0.899378178 0.900872890 0.904047266 0.923397358 0.927270798 0.935064186 0.936875564 0.966017841 0.975890826 0.986046764 1.001146343 1.018474542 1.027993657 1.041717817 1.050808624 1.057504799 1.068672271 1.086621695 1.088684565 1.104406258 1.106459846 1.112368183 1.123888698 1.125210214 1.135892549 1.143803797 1.174495496 1.178771385 1.181088771 1.186561942 1.191356501 1.196200953 1.224581527 1.228334525 1.274895983 1.301807709 1.319511422 1.328132803 1.333077391 1.335552283 1.336250507 1.342411846 1.343098542 1.344993738 1.359065457 1.378691321 1.382899728 1.384331308 1.415522899 1.420269399 1.436320467 1.551475521 1.681568059 1.776076364</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">227</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34081248" y3="0.03564043" z3="-0.19264468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38589418" y3="0.16330373" z3="0.41843738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64514411" y3="0.43618054" z3="-0.3395058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72209288" y3="1.22907783" z3="-2.25561749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38692439" y3="0.41863606" z3="-1.18326414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72312141" y3="0.83696538" z3="-3.65692793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62359646" y3="1.74093024" z3="-3.12385153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3642848" y3="2.58242562" z3="-4.59431148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55215863" y3="1.23961351" z3="-4.36539529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4829227" y3="2.91702464" z3="-5.15014712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92699911" y3="-0.49373161" z3="-3.44572736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09901692" y3="0.02084709" z3="-1.00288277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40583593" y3="-1.11900362" z3="-2.00957975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93385428" y3="-0.99393014" z3="-1.8353476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11128694" y3="-2.4424548" z3="-1.86245543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13896684" y3="-3.60509203" z3="0.67047051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01479616" y3="-5.27786784" z3="-4.73668253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24281961" y3="-5.01354562" z3="-3.7006002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83925235" y3="-4.30545742" z3="-1.08519195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78324373" y3="-4.60636831" z3="-2.84996469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56001653" y3="-5.09313188" z3="-3.2430438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85902256" y3="-4.73373362" z3="-1.93134278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49688243" y3="-4.26721524" z3="-1.52610176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81609539" y3="-4.53152099" z3="-3.19585859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36032258" y3="-5.4064025" z3="-3.9171371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89555446" y3="-4.76567759" z3="-1.58889731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02778677" y3="-3.84966623" z3="0.23326724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16761749" y3="-3.63521047" z3="0.87835459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05577958" y3="-4.09766524" z3="0.44494859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16308561" y3="-3.49701181" z3="2.34505004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22441014" y3="-3.30447641" z3="5.14232721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36084767" y3="-3.69536592" z3="3.04770739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99532057" y3="-3.20956013" z3="3.06736738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02308815" y3="-3.11442089" z3="4.45568026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3907161" y3="-3.6010801" z3="4.43615839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27594895" y3="-3.93354231" z3="2.49916672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03486909" y3="-3.08164727" z3="2.56359322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0932901" y3="-2.91182257" z3="4.9948829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33061838" y3="-3.76620855" z3="4.97058267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24612011" y3="-3.23755599" z3="6.23353972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41939634" y3="-3.90280511" z3="-0.62420172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18016825" y3="-3.40676577" z3="-1.08081793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51601866" y3="0.23246105" z3="-4.70925103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07702165" y3="-1.70845209" z3="0.01834995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89356952" y3="-0.9534961" z3="1.17598661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82859564" y3="-0.30496176" z3="1.50150092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35193873" y3="0.56391868" z3="1.19833403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42645051" y3="1.44807348" z3="-0.43642142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99524766" y3="-0.69452475" z3="1.39322828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33883376" y3="1.7717788" z3="2.63018695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86406244" y3="-0.93669417" z3="2.07863669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62680762" y3="-0.31929636" z3="3.33359738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18670951" y3="0.74987141" z3="-1.25684005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34546447" y3="2.23993065" z3="-0.43799227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40752668" y3="1.92873979" z3="-0.60277291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01517619" y3="-1.05453139" z3="2.43549425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97214006" y3="-0.23730361" z3="1.15917942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87191515" y3="-1.53894359" z3="0.69614017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40261347" y3="1.24455951" z3="3.59883722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60108822" y3="2.353494" z3="2.62487387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17600472" y3="2.49018001" z3="2.56814946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76575938" y3="-0.77933264" z3="3.84423771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54055987" y3="-0.48515816" z3="3.91972361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.44913344" y3="0.76175937" z3="3.20873994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8443919" y3="-0.72688922" z3="0.98768135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41374613" y3="-2.05187211" z3="0.84373588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7602829" y3="-2.70016" z3="1.88444334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55494517" y3="-2.01078322" z3="3.07585935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03954336" y3="-0.72183408" z3="3.27661239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69241978" y3="-0.08683486" z3="2.22485873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51556653" y3="-2.54600143" z3="-0.12418416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36001837" y3="-3.70668668" z3="1.75684882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69181425" y3="-2.6108467" z3="4.09824677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86021435" y3="-0.21540117" z3="4.22539196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03897975" y3="0.94323654" z3="2.34437488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80349707" y3="0.44794383" z3="-4.28798295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78003984" y3="-0.52166583" z3="-4.46976139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42702386" y3="-1.71156101" z3="-5.09694777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13850713" y3="-1.93726107" z3="-5.5716745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8308233" y3="-0.96371611" z3="-5.36666659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05302995" y3="1.36927857" z3="-3.75484558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80030973" y3="-0.37920319" z3="-4.1129197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4353221" y3="-2.76370586" z3="-5.23948023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09620484" y3="-2.87584933" z3="-6.07383906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85370413" y3="-1.14550384" z3="-5.70051612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36987113" y3="-1.9202491" z3="5.0459937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3070641" y3="-3.74851577" z3="3.92358073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20675191" y3="-3.66519698" z3="-6.01706482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44011973" y3="-2.68104582" z3="-4.56112866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0654687" y3="1.16692782" z3="-1.48402519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10301083" y3="1.55557337" z3="-2.46090611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43210498" y3="1.50676476" z3="-1.67857695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8384315" y3="2.18189629" z3="-2.80317803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15989338" y3="1.20993448" z3="-0.91694893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89387864" y3="2.43550785" z3="-2.94394513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55970775" y3="2.23591073" z3="-3.6240544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88928143" y3="2.53966729" z3="-3.79053502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8373601" y3="2.50873454" z3="-4.3968409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21807299" y3="3.05843952" z3="-4.69617325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38448766" y3="3.14485847" z3="-3.31000375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26557548" y3="3.55712177" z3="-4.09225128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18753967" y3="4.1554299" z3="-2.71046007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92811127" y3="5.4890235" z3="-2.92289817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01876574" y3="3.86651974" z3="-2.06535524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56211668" y3="6.24388581" z3="-2.45053272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03202418" y3="4.94352819" z3="-4.30659024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84773763" y3="5.89286186" z3="-3.74282584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.1778133" y3="5.24088342" z3="-4.92278606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65637834" y3="6.95676831" z3="-3.91105309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47819237" y3="-2.18269655" z3="-0.29256394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45491762" y3="-2.98109597" z3="-1.0541283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00577426" y3="-2.55641256" z3="0.59950749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09080201" y3="-1.36312947" z3="-0.71408615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17769067" y3="-1.419857" z3="-1.15711841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31462628" y3="-0.38128993" z3="-1.5092626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10082356" y3="-1.54603207" z3="-0.95634423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42420392" y3="-2.07751234" z3="-2.00467336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,.0356,-.1926;7.3859,.1633,.4184;6.6451,.4362,-.3395;4.7221,1.2291,-2.2556;4.3869,.4186,-1.1833;2.7231,.837,-3.6569;3.6236,1.7409,-3.1239;1.3643,2.5824,-4.5943;1.5522,1.2396,-4.3654;.4829,2.917,-5.1501;2.927,-.4937,-3.4457;3.099,.0208,-1.0029;2.4058,-1.119,-2.0096;.9339,-.9939,-1.8353;3.1113,-2.4425,-1.8625;-.139,-3.6051,.6705;-.0148,-5.2779,-4.7367;-.2428,-5.0135,-3.7006;-.8393,-4.3055,-1.0852;.7832,-4.6064,-2.85;-1.56,-5.0931,-3.243;-1.859,-4.7337,-1.9313;.4969,-4.2672,-1.5261;1.8161,-4.5315,-3.1959;-2.3603,-5.4064,-3.9171;-2.8956,-4.7657,-1.5889;-1.0278,-3.8497,.2333;-2.1676,-3.6352,.8784;-3.0558,-4.0977,.4449;-2.1631,-3.497,2.3451;-2.2244,-3.3045,5.1423;-3.3608,-3.6954,3.0477;-.9953,-3.2096,3.0674;-1.0231,-3.1144,4.4557;-3.3907,-3.6011,4.4362;-4.2759,-3.9335,2.4992;-.0349,-3.0816,2.5636;-.0933,-2.9118,4.9949;-4.3306,-3.7662,4.9706;-2.2461,-3.2376,6.2335;1.4194,-3.9028,-.6242;2.1802,-3.4068,-1.0808;.516,.2325,-4.7093;-3.077,-1.7085,.0183;-2.8936,-.9535,1.176;-1.8286,-.305,1.5015;-.3519,.5639,1.1983;-.4265,1.4481,-.4364;.9952,-.6945,1.3932;-.3388,1.7718,2.6302;-3.8641,-.9367,2.0786;-3.6268,-.3193,3.3336;-.1867,.7499,-1.2568;.3455,2.2399,-.438;-1.4075,1.9287,-.6028;1.0152,-1.0545,2.4355;1.9721,-.2373,1.1592;.8719,-1.5389,.6961;-.4026,1.2446,3.5988;.6011,2.3535,2.6249;-1.176,2.4902,2.5681;-2.7658,-.7793,3.8442;-4.5406,-.4852,3.9197;-3.4491,.7618,3.2087;4.8444,-.7269,.9877;4.4137,-2.0519,.8437;3.7603,-2.7002,1.8844;3.5549,-2.0108,3.0759;4.0395,-.7218,3.2766;4.6924,-.0868,2.2249;4.5156,-2.546,-.1242;3.36,-3.7067,1.7568;2.6918,-2.6108,4.0982;3.8602,-.2154,4.2254;5.039,.9432,2.3444;-.8035,.4479,-4.288;-1.78,-.5217,-4.4698;-1.427,-1.7116,-5.0969;-.1385,-1.9373,-5.5717;.8308,-.9637,-5.3667;-1.053,1.3693,-3.7548;-2.8003,-.3792,-4.1129;-2.4353,-2.7637,-5.2395;.0962,-2.8758,-6.0738;1.8537,-1.1455,-5.7005;2.3699,-1.9202,5.046;2.3071,-3.7485,3.9236;-2.2068,-3.6652,-6.0171;-3.4401,-2.681,-4.5611;7.0655,1.1669,-1.484;6.103,1.5556,-2.4609;8.4321,1.5068,-1.6786;8.8384,2.1819,-2.8032;9.1599,1.2099,-.9169;9.8939,2.4355,-2.9439;6.5597,2.2359,-3.6241;7.8893,2.5397,-3.7905;5.8374,2.5087,-4.3968;8.2181,3.0584,-4.6962;3.3845,3.1449,-3.31;2.2656,3.5571,-4.0923;4.1875,4.1554,-2.7105;3.9281,5.489,-2.9229;5.0188,3.8665,-2.0654;4.5621,6.2439,-2.4505;2.032,4.9435,-4.3066;2.8477,5.8929,-3.7428;1.1778,5.2409,-4.9228;2.6564,6.9568,-3.9111;-4.4782,-2.1827,-.2926;-4.4549,-2.9811,-1.0541;-5.0058,-2.5564,.5995;-5.0908,-1.3631,-.7141;-2.1777,-1.4199,-1.1571;-2.3146,-.3813,-1.5093;-1.1008,-1.546,-.9563;-2.4242,-2.0775,-2.0047;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650406642841</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002303887532 0.000339999061 0.015327279703 0.005321000236</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030649449 -0.000832390 0.000025203 0.000143105 0.000224374 0.000331921 0.000403277 0.000426138 0.000590529 0.000807800 0.000927010 0.001053316 0.001270820 0.001341036 0.001383450 0.001420732 0.001568286 0.001819588 0.001842621 0.001961399 0.002159611 0.002405284 0.002629344 0.002673747 0.002803590 0.002983418 0.003128725 0.003469725 0.003648791 0.003919705 0.004450319 0.004709724 0.004812770 0.005080965 0.006019270 0.006079941 0.006145191 0.006598123 0.006947336 0.007715009 0.008101717 0.008226428 0.009277625 0.009541460 0.010010797 0.010653061 0.010974790 0.011053547 0.011697607 0.012214982 0.012912826 0.013136064 0.014021326 0.014558665 0.015127265 0.015479375 0.015713855 0.016247457 0.016916456 0.017463799 0.018109648 0.018312953 0.019406787 0.019571007 0.019974225 0.020805105 0.021218246 0.021411103 0.022575821 0.023137792 0.025132997 0.026045351 0.026794668 0.026984753 0.027675465 0.029375790 0.029554697 0.031437589 0.033288587 0.033500199 0.033935907 0.035786022 0.036881539 0.037660915 0.039595025 0.040027363 0.040826132 0.042333887 0.044289355 0.045180192 0.045469834 0.046980990 0.047766552 0.049215575 0.050365073 0.050856909 0.051089698 0.051282192 0.052478700 0.052642807 0.052893322 0.053088212 0.054707995 0.054906682 0.055907794 0.056252312 0.056497372 0.056651470 0.057092570 0.058476478 0.060336998 0.060865564 0.061688711 0.062134015 0.063263721 0.064430432 0.065197942 0.065910891 0.066435892 0.067862001 0.069014122 0.070251644 0.072717917 0.074455145 0.074711592 0.076200890 0.078280324 0.083626008 0.085536497 0.087068013 0.087298819 0.088144293 0.090427747 0.090959491 0.092996926 0.094602730 0.095391407 0.096408720 0.097640416 0.097968617 0.098880032 0.099969144 0.100371001 0.102434133 0.103186859 0.103396018 0.103774857 0.104303227 0.105863363 0.106910836 0.107404606 0.109683537 0.110826015 0.111893360 0.112551876 0.114869705 0.115843794 0.116328200 0.118660316 0.120342388 0.121035686 0.122890668 0.124267474 0.125288112 0.126024557 0.126288283 0.127045350 0.131980034 0.135038039 0.135770079 0.142772899 0.143572897 0.147032088 0.147480443 0.149698135 0.152508173 0.154699729 0.156185638 0.156706602 0.161514316 0.161848868 0.173543824 0.174053455 0.179888545 0.184310386 0.185741865 0.189536332 0.190308259 0.194080296 0.194351879 0.198349082 0.200151077 0.205199145 0.206899479 0.207294096 0.210182457 0.214564405 0.216507804 0.217818564 0.218677231 0.220692286 0.225229619 0.226281080 0.232139540 0.235087673 0.235474747 0.235916443 0.244569779 0.256002456 0.257246653 0.263616926 0.269842750 0.280358458 0.282943856 0.286298188 0.291587208 0.296705939 0.304334477 0.305727345 0.307287171 0.314207404 0.316685203 0.317374456 0.322133059 0.329745649 0.332808907 0.351777147 0.352149035 0.354944139 0.355762219 0.360062217 0.362786358 0.364102031 0.384433920 0.386033800 0.391942743 0.410662693 0.425584234 0.430888863 0.462265273 0.468658822 0.478270047 0.483630068 0.484274422 0.487628436 0.491393528 0.509526383 0.515278421 0.535217473 0.566652038 0.573458204 0.592317467 0.593776327 0.606416611 0.608079234 0.644661222 0.646878262 0.649347868 0.674267200 0.677799463 0.685613622 0.691875970 0.693495646 0.700033438 0.704408658 0.717314230 0.741265832 0.751237399 0.759138723 0.769378529 0.772649638 0.778783220 0.810928986 0.815315117 0.819571294 0.821639137 0.823469885 0.831555199 0.834514988 0.836027662 0.842239930 0.845706850 0.847478265 0.849511159 0.859026294 0.865888396 0.866659525 0.873949655 0.884399664 0.885678482 0.889665335 0.899441521 0.900933302 0.904058966 0.923398535 0.927324714 0.935105094 0.936912207 0.966054292 0.975894838 0.986050650 1.001146841 1.018553771 1.027998475 1.041723724 1.050815863 1.057505036 1.068708661 1.086625005 1.088684484 1.104440829 1.106523861 1.112381790 1.123906608 1.125600009 1.135906802 1.143816295 1.174546019 1.178839410 1.181109783 1.186602689 1.191377333 1.196204332 1.224592724 1.228341832 1.274947212 1.301853295 1.319514138 1.328133003 1.333132292 1.335670053 1.336257863 1.342412299 1.343109110 1.345004741 1.359083596 1.378692726 1.382914055 1.384461897 1.415533764 1.420281230 1.436358950 1.551476074 1.681579412 1.776085391</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">228</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34503249" y3="0.03205554" z3="-0.1940207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39085376" y3="0.16019348" z3="0.41338844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64863977" y3="0.43334676" z3="-0.34292814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7217788" y3="1.22666702" z3="-2.25487754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38930367" y3="0.41542387" z3="-1.18266214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72035783" y3="0.83397814" z3="-3.65191519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6210227" y3="1.7380253" z3="-3.12037906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35745118" y3="2.57770865" z3="-4.58461494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54689454" y3="1.23646253" z3="-4.35617428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47411943" y3="2.912487" z3="-5.13735634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92688649" y3="-0.49691178" z3="-3.4429199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10213511" y3="0.01679826" z3="-1.0006526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40845269" y3="-1.12344049" z3="-2.00642791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93649281" y3="-0.99965834" z3="-1.83016297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11511509" y3="-2.4461912" z3="-1.8603937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13961709" y3="-3.59889922" z3="0.66871543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00439637" y3="-5.28552156" z3="-4.73400632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23489933" y3="-5.01744857" z3="-3.69938174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83633875" y3="-4.30098269" z3="-1.08755893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78959991" y3="-4.61135538" z3="-2.84654857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55291089" y3="-5.09206602" z3="-3.24591148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85442154" y3="-4.72781436" z3="-1.93603393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50095631" y3="-4.26824637" z3="-1.52419036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82565303" y3="-4.5452627" z3="-3.18989536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35225413" y3="-5.40363863" z3="-3.92183229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89353816" y3="-4.75146622" z3="-1.59723171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02768256" y3="-3.84273191" z3="0.22984247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16838994" y3="-3.62995981" z3="0.87365255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05545998" y3="-4.09207112" z3="0.43828154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16684053" y3="-3.49229596" z3="2.34010726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23023359" y3="-3.30690358" z3="5.13778584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36599483" y3="-3.690779" z3="3.04026021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00015905" y3="-3.20588749" z3="3.0646354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02931873" y3="-3.11372746" z3="4.45318349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39683656" y3="-3.59997652" z3="4.42906653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28141138" y3="-3.92571963" z3="2.4894845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03842152" y3="-3.07774623" z3="2.5622393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10004114" y3="-2.91214517" z3="4.99400339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33671604" y3="-3.76664517" z3="4.96162604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2523351" y3="-3.24311123" z3="6.22938392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4227712" y3="-3.90607991" z3="-0.62034799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18428761" y3="-3.41088719" z3="-1.07618808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51265656" y3="0.22736853" z3="-4.70163949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07929377" y3="-1.7005403" z3="0.01633766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89104205" y3="-0.94728901" z3="1.17395844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82198423" y3="-0.30407628" z3="1.49777477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3474975" y3="0.56740585" z3="1.19545938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42185419" y3="1.44833461" z3="-0.44155757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99984177" y3="-0.69070573" z3="1.39550959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33762904" y3="1.77871384" z3="2.62454936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85967064" y3="-0.92732164" z3="2.0787173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61656181" y3="-0.31265859" z3="3.33433863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17687453" y3="0.74899741" z3="-1.25913074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34700649" y3="2.24416447" z3="-0.44420562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40487219" y3="1.92199744" z3="-0.61115689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01727253" y3="-1.0489995" z3="2.43804672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97605952" y3="-0.23351639" z3="1.16261644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87694493" y3="-1.53583085" z3="0.69854035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40264841" y3="1.2530982" z3="3.59344314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60213606" y3="2.36038639" z3="2.62041813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17487962" y3="2.49574294" z3="2.55949912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75704901" y3="-0.7778024" z3="3.8431879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53008118" y3="-0.47420532" z3="3.92187904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43401763" y3="0.76712011" z3="3.21017786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84993851" y3="-0.73097354" z3="0.98654915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41916068" y3="-2.05591034" z3="0.84243992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76332678" y3="-2.70345313" z3="1.88210546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55643177" y3="-2.01349137" z3="3.07298318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04269096" y3="-0.7250417" z3="3.27481753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69740067" y3="-0.09072612" z3="2.22378988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52255563" y3="-2.55053509" z3="-0.12469271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36164192" y3="-3.70953996" z3="1.7535483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6891579" y3="-2.61172418" z3="4.09288511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86294923" y3="-0.21822984" z3="4.22383381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04484448" y3="0.93928817" z3="2.34401562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80684857" y3="0.44122692" z3="-4.28249916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78189142" y3="-0.53012637" z3="-4.46933708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42628164" y3="-1.71852149" z3="-5.09482207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13741456" y3="-1.94237629" z3="-5.56868685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83015307" y3="-0.96781426" z3="-5.36285277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05778951" y3="1.3614011" z3="-3.74933238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.8026209" y3="-0.38962443" z3="-4.11266751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43306595" y3="-2.77203679" z3="-5.24067343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09893497" y3="-2.87999346" z3="-6.07182626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85388593" y3="-1.14753555" z3="-5.69496478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36114878" y3="-1.91877636" z3="5.03602692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30675349" y3="-3.7500328" z3="3.92037012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20280946" y3="-3.67182999" z3="-6.02017374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43797098" y3="-2.69221314" z3="-4.56249156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06640721" y3="1.16649592" z3="-1.48711314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10189462" y3="1.55523006" z3="-2.46197305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43246747" y3="1.50893936" z3="-1.68333269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83626322" y3="2.18728874" z3="-2.80745885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16155242" y3="1.21041763" z3="-0.92382684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89006503" y3="2.43662889" z3="-2.95114275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55566113" y3="2.23780678" z3="-3.62498943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88505652" y3="2.54510644" z3="-3.79284403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83136904" y3="2.50961943" z3="-4.39645628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2115026" y3="3.06154411" z3="-4.69910552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37925887" y3="3.14198282" z3="-3.30338328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25806774" y3="3.55338306" z3="-4.0826596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18106839" y3="4.1539257" z3="-2.70207774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92054633" y3="5.48646365" z3="-2.91314675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01421474" y3="3.86510511" z3="-2.05943651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5529851" y3="6.24316191" z3="-2.43849943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02194659" y3="4.94002196" z3="-4.29377419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83787258" y3="5.88953579" z3="-3.73036982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16591013" y3="5.23728494" z3="-4.90745878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64607597" y3="6.95264903" z3="-3.89775645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48182325" y3="-2.1726762" z3="-0.2909868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46123163" y3="-2.97133096" z3="-1.05169231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00754601" y3="-2.54435302" z3="0.60326427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09409349" y3="-1.35271662" z3="-0.71220234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18102136" y3="-1.41486912" z3="-1.16046503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31398125" y3="-0.37441884" z3="-1.51220522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10404796" y3="-1.54445019" z3="-0.96036034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42960851" y3="-2.07247928" z3="-2.00673865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.345,.0321,-.194;7.3909,.1602,.4134;6.6486,.4333,-.3429;4.7218,1.2267,-2.2549;4.3893,.4154,-1.1827;2.7204,.834,-3.6519;3.621,1.738,-3.1204;1.3575,2.5777,-4.5846;1.5469,1.2365,-4.3562;.4741,2.9125,-5.1374;2.9269,-.4969,-3.4429;3.1021,.0168,-1.0007;2.4085,-1.1234,-2.0064;.9365,-.9997,-1.8302;3.1151,-2.4462,-1.8604;-.1396,-3.5989,.6687;-.0044,-5.2855,-4.734;-.2349,-5.0174,-3.6994;-.8363,-4.301,-1.0876;.7896,-4.6114,-2.8465;-1.5529,-5.0921,-3.2459;-1.8544,-4.7278,-1.936;.501,-4.2682,-1.5242;1.8257,-4.5453,-3.1899;-2.3523,-5.4036,-3.9218;-2.8935,-4.7515,-1.5972;-1.0277,-3.8427,.2298;-2.1684,-3.63,.8737;-3.0555,-4.0921,.4383;-2.1668,-3.4923,2.3401;-2.2302,-3.3069,5.1378;-3.366,-3.6908,3.0403;-1.0002,-3.2059,3.0646;-1.0293,-3.1137,4.4532;-3.3968,-3.6,4.4291;-4.2814,-3.9257,2.4895;-.0384,-3.0777,2.5622;-.1,-2.9121,4.994;-4.3367,-3.7666,4.9616;-2.2523,-3.2431,6.2294;1.4228,-3.9061,-.6203;2.1843,-3.4109,-1.0762;.5127,.2274,-4.7016;-3.0793,-1.7005,.0163;-2.891,-.9473,1.174;-1.822,-.3041,1.4978;-.3475,.5674,1.1955;-.4219,1.4483,-.4416;.9998,-.6907,1.3955;-.3376,1.7787,2.6245;-3.8597,-.9273,2.0787;-3.6166,-.3127,3.3343;-.1769,.749,-1.2591;.347,2.2442,-.4442;-1.4049,1.922,-.6112;1.0173,-1.049,2.438;1.9761,-.2335,1.1626;.8769,-1.5358,.6985;-.4026,1.2531,3.5934;.6021,2.3604,2.6204;-1.1749,2.4957,2.5595;-2.757,-.7778,3.8432;-4.5301,-.4742,3.9219;-3.434,.7671,3.2102;4.8499,-.731,.9865;4.4192,-2.0559,.8424;3.7633,-2.7035,1.8821;3.5564,-2.0135,3.073;4.0427,-.725,3.2748;4.6974,-.0907,2.2238;4.5226,-2.5505,-.1247;3.3616,-3.7095,1.7535;2.6892,-2.6117,4.0929;3.8629,-.2182,4.2238;5.0448,.9393,2.344;-.8068,.4412,-4.2825;-1.7819,-.5301,-4.4693;-1.4263,-1.7185,-5.0948;-.1374,-1.9424,-5.5687;.8302,-.9678,-5.3629;-1.0578,1.3614,-3.7493;-2.8026,-.3896,-4.1127;-2.4331,-2.772,-5.2407;.0989,-2.88,-6.0718;1.8539,-1.1475,-5.695;2.3611,-1.9188,5.036;2.3068,-3.75,3.9204;-2.2028,-3.6718,-6.0202;-3.438,-2.6922,-4.5625;7.0664,1.1665,-1.4871;6.1019,1.5552,-2.462;8.4325,1.5089,-1.6833;8.8363,2.1873,-2.8075;9.1616,1.2104,-.9238;9.8901,2.4366,-2.9511;6.5557,2.2378,-3.625;7.8851,2.5451,-3.7928;5.8314,2.5096,-4.3965;8.2115,3.0615,-4.6991;3.3793,3.142,-3.3034;2.2581,3.5534,-4.0827;4.1811,4.1539,-2.7021;3.9205,5.4865,-2.9131;5.0142,3.8651,-2.0594;4.553,6.2432,-2.4385;2.0219,4.94,-4.2938;2.8379,5.8895,-3.7304;1.1659,5.2373,-4.9075;2.6461,6.9526,-3.8978;-4.4818,-2.1727,-.291;-4.4612,-2.9713,-1.0517;-5.0075,-2.5444,.6033;-5.0941,-1.3527,-.7122;-2.181,-1.4149,-1.1605;-2.314,-.3744,-1.5122;-1.104,-1.5445,-.9604;-2.4296,-2.0725,-2.0067;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650393564571</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002625966161 0.000364505391 0.020182740865 0.005337034726</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030649559 -0.000549981 0.000025539 0.000145565 0.000286652 0.000361342 0.000403491 0.000427769 0.000590480 0.000809911 0.000927858 0.001054680 0.001269483 0.001343185 0.001383191 0.001421480 0.001567578 0.001819780 0.001841710 0.001961363 0.002168519 0.002404501 0.002636771 0.002674796 0.002801829 0.002985554 0.003128226 0.003470610 0.003642934 0.003919472 0.004450014 0.004711606 0.004813540 0.005080580 0.006022479 0.006082131 0.006150242 0.006609451 0.006952755 0.007739685 0.008101778 0.008232094 0.009288080 0.009540088 0.010011989 0.010658562 0.010974264 0.011078337 0.011698294 0.012219233 0.012919221 0.013136119 0.014021667 0.014559635 0.015129708 0.015484761 0.015715598 0.016247650 0.016916546 0.017463918 0.018109391 0.018327091 0.019408751 0.019572691 0.019974505 0.020805676 0.021218847 0.021410754 0.022577506 0.023137775 0.025137078 0.026045820 0.026795014 0.026985462 0.027681225 0.029403981 0.029557466 0.031448924 0.033288942 0.033507122 0.033941366 0.035787238 0.036890557 0.037663675 0.039594682 0.040030831 0.040831783 0.042339216 0.044289870 0.045180600 0.045469945 0.046983938 0.047777956 0.049218037 0.050374981 0.050863984 0.051096083 0.051282319 0.052478715 0.052644265 0.052896063 0.053098556 0.054708082 0.054906569 0.055909061 0.056255486 0.056497997 0.056658720 0.057104888 0.058499358 0.060343498 0.060873785 0.061688704 0.062142545 0.063264369 0.064435542 0.065212269 0.065915181 0.066437282 0.067867659 0.069025702 0.070256111 0.072719871 0.074456261 0.074712341 0.076203638 0.078291041 0.083625920 0.085583913 0.087084086 0.087302502 0.088165946 0.090432996 0.090961269 0.092996984 0.094602981 0.095407649 0.096408832 0.097701157 0.098010222 0.098882643 0.099970705 0.100379085 0.102435002 0.103187297 0.103397481 0.103811026 0.104344624 0.105871156 0.106910811 0.107413877 0.109699460 0.110833314 0.111893635 0.112552100 0.114876006 0.115914974 0.116340822 0.118662371 0.120343479 0.121040362 0.122897685 0.124273981 0.125297813 0.126024916 0.126290686 0.127045458 0.131979906 0.135037750 0.135772172 0.142777227 0.143587345 0.147033324 0.147516363 0.149704211 0.152508568 0.154700763 0.156185664 0.156706540 0.161513041 0.161849218 0.173551222 0.174067170 0.179916601 0.184322188 0.185872877 0.189545134 0.190321030 0.194082481 0.194412149 0.198351148 0.200159477 0.205201823 0.206899525 0.207303600 0.210189864 0.214565590 0.216541445 0.217830635 0.218767170 0.220698422 0.225238439 0.226295893 0.232140417 0.235094097 0.235477296 0.235917467 0.244569922 0.256006758 0.257248062 0.263623648 0.269850301 0.280363979 0.282944542 0.286298194 0.291594939 0.296706686 0.304337788 0.305731262 0.307287135 0.314227687 0.316685422 0.317374444 0.322149255 0.329754410 0.332809656 0.351777383 0.352151947 0.355001126 0.355762512 0.360068705 0.362795657 0.364102777 0.384441175 0.386036397 0.391958690 0.410663838 0.425596743 0.430894299 0.462266136 0.468662301 0.478279608 0.483637006 0.484274394 0.487628360 0.491398123 0.509531854 0.515288589 0.535219640 0.566838111 0.573474858 0.592320206 0.593798652 0.606416650 0.608117039 0.644661211 0.646884139 0.649396050 0.674267364 0.677805417 0.685667648 0.691887516 0.693508712 0.700066750 0.704410655 0.717321510 0.741274845 0.751239017 0.759189570 0.769481934 0.772656947 0.778786889 0.810955461 0.815315039 0.819604101 0.821640058 0.823485325 0.831568788 0.834536157 0.836039555 0.842263340 0.845708778 0.847479315 0.849551026 0.859026292 0.865888793 0.866678030 0.873950137 0.884565126 0.885697297 0.889675121 0.899441641 0.900939884 0.904061837 0.923399826 0.927359212 0.935171133 0.936913579 0.966097656 0.975894848 0.986052299 1.001147344 1.018649854 1.028005856 1.041733208 1.050824726 1.057506640 1.068748135 1.086626440 1.088684339 1.104473976 1.106602301 1.112398309 1.123906878 1.126104382 1.135924288 1.143843710 1.174604634 1.178894302 1.181125260 1.186643461 1.191389657 1.196208714 1.224595782 1.228342262 1.275009918 1.301920124 1.319514320 1.328134006 1.333186863 1.335843616 1.336274114 1.342413496 1.343125527 1.345014018 1.359124676 1.378695664 1.382926954 1.384627582 1.415536539 1.420282456 1.436378428 1.551476634 1.681581785 1.776101113</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">229</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34646918" y3="0.03078994" z3="-0.19171253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39261634" y3="0.1634009" z3="0.41453173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6493675" y3="0.43503749" z3="-0.34135141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71971976" y3="1.22502832" z3="-2.25191079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38931791" y3="0.41241824" z3="-1.17977752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71905644" y3="0.82842319" z3="-3.64964059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61756959" y3="1.7346162" z3="-3.11674794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35346095" y3="2.57075563" z3="-4.58238616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54605099" y3="1.22824452" z3="-4.35622901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47058641" y3="2.9031136" z3="-5.13718993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92702266" y3="-0.50193854" z3="-3.4398506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10274707" y3="0.01155063" z3="-0.99689854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40947183" y3="-1.12876929" z3="-2.00297624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93752484" y3="-1.00550233" z3="-1.82604321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11678717" y3="-2.45129933" z3="-1.85757635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14112912" y3="-3.59220106" z3="0.66244156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0018847" y3="-5.2955154" z3="-4.73469204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2333641" y3="-5.02316397" z3="-3.70131927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83836856" y3="-4.29524201" z3="-1.09287984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79138034" y3="-4.61962995" z3="-2.84731255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55370375" y3="-5.08868998" z3="-3.25044224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85718782" y3="-4.71854827" z3="-1.9425774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50060131" y3="-4.27095315" z3="-1.52674834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82686217" y3="-4.5561227" z3="-3.188003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35232415" y3="-5.40022161" z3="-3.92672016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89613962" y3="-4.73836756" z3="-1.60623509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02960973" y3="-3.83461946" z3="0.22356982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17012196" y3="-3.62235312" z3="0.86784324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05767172" y3="-4.08302263" z3="0.43164662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16750838" y3="-3.48919906" z3="2.33491667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23171559" y3="-3.31089284" z3="5.13292289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36654592" y3="-3.68818092" z3="3.03481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99988196" y3="-3.2075888" z3="3.06019696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02912124" y3="-3.11943675" z3="4.44894531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39773486" y3="-3.6012655" z3="4.42368399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28109284" y3="-3.92150287" z3="2.48365129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03825732" y3="-3.07898667" z3="2.55850127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09977702" y3="-2.92037845" z3="4.99022763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33857613" y3="-3.76713586" z3="4.95597643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25434573" y3="-3.25009331" z3="6.22449544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42168216" y3="-3.91087604" z3="-0.62153747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18473903" y3="-3.41657907" z3="-1.07590173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51303364" y3="0.21898915" z3="-4.70292697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07945273" y3="-1.6912456" z3="0.01537682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88712821" y3="-0.94051456" z3="1.17403322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81583893" y3="-0.30101821" z3="1.49663358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34097371" y3="0.57086685" z3="1.19840252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40914514" y3="1.45118749" z3="-0.43884292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00499211" y3="-0.68736092" z3="1.40149624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33387263" y3="1.78169152" z3="2.62814055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8537578" y3="-0.91988304" z3="2.08071244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6057588" y3="-0.31051144" z3="3.33779645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1726609" y3="0.7490859" z3="-1.2569405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.36718923" y3="2.23872197" z3="-0.44268289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38720265" y3="1.93621147" z3="-0.60730708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01884252" y3="-1.04731084" z3="2.44398444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98292174" y3="-0.23091467" z3="1.17229672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88377056" y3="-1.53138907" z3="0.7034802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39669083" y3="1.25603117" z3="3.59734636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60396039" y3="2.36647836" z3="2.62335739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17322159" y3="2.49689719" z3="2.56442562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74594593" y3="-0.77987513" z3="3.84247216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51782556" y3="-0.47158492" z3="3.92754407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42023135" y3="0.76918438" z3="3.21704001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.85295103" y3="-0.73231527" z3="0.9895041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42176515" y3="-2.05719858" z3="0.84607313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7658638" y3="-2.70392441" z3="1.88619567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55863815" y3="-2.01311371" z3="3.07640132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04534435" y3="-0.72493777" z3="3.27739742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70091158" y3="-0.09157583" z3="2.22638768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52385928" y3="-2.55208265" z3="-0.12148694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3642827" y3="-3.70991627" z3="1.75866936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68999051" y3="-2.60998107" z3="4.09592905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86469585" y3="-0.2171567" z3="4.22517557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0485115" y3="0.93828958" z3="2.34579911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80820722" y3="0.43302646" z3="-4.28708808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78342041" y3="-0.53676775" z3="-4.4757376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42695225" y3="-1.72531599" z3="-5.10297974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13608313" y3="-1.94999552" z3="-5.57111849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83175002" y3="-0.9763946" z3="-5.36066755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.06059867" y3="1.35338971" z3="-3.75421377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80544218" y3="-0.39540193" z3="-4.12362319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43425272" y3="-2.7771784" z3="-5.25245093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10127042" y3="-2.88780256" z3="-6.07362529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85622187" y3="-1.15725189" z3="-5.68955069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35937432" y3="-1.91491137" z3="5.03745979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30950598" y3="-3.74944851" z3="3.92499315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20266465" y3="-3.67674242" z3="-6.03135861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44108927" y3="-2.69678087" z3="-4.57696082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06491706" y3="1.16824032" z3="-1.48610223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0990856" y3="1.55565694" z3="-2.46013155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42992928" y3="1.51222963" z3="-1.68349262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83146872" y3="2.19046091" z3="-2.80794287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1604377" y3="1.21639694" z3="-0.92410342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88583265" y3="2.44810616" z3="-2.95064784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55083838" y3="2.23912007" z3="-3.6232935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87898017" y3="2.54712763" z3="-3.79243016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82583757" y3="2.51099314" z3="-4.39392594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20399189" y3="3.068907" z3="-4.69791248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37339017" y3="3.13795629" z3="-3.2996871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25188264" y3="3.54761064" z3="-4.07942867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17388442" y3="4.15017511" z3="-2.69911674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90942354" y3="5.48327042" z3="-2.90823358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00708751" y3="3.86296444" z3="-2.05588645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54144766" y3="6.23949717" z3="-2.43515546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01333228" y3="4.93346635" z3="-4.29068091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82659749" y3="5.88460506" z3="-3.72601717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15723039" y3="5.22895427" z3="-4.90509491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63130127" y3="6.94823754" z3="-3.89172014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48359197" y3="-2.16004508" z3="-0.28959247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46682964" y3="-2.95879529" z3="-1.05095399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00859994" y3="-2.53137072" z3="0.60506286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09492635" y3="-1.33836978" z3="-0.708804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1839144" y3="-1.40515454" z3="-1.16359911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31787211" y3="-0.36562307" z3="-1.51423074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10637545" y3="-1.53591551" z3="-0.96717629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4363241" y3="-2.06138646" z3="-2.01040472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3465,.0308,-.1917;7.3926,.1634,.4145;6.6494,.435,-.3414;4.7197,1.225,-2.2519;4.3893,.4124,-1.1798;2.7191,.8284,-3.6496;3.6176,1.7346,-3.1167;1.3535,2.5708,-4.5824;1.5461,1.2282,-4.3562;.4706,2.9031,-5.1372;2.927,-.5019,-3.4399;3.1027,.0116,-.9969;2.4095,-1.1288,-2.003;.9375,-1.0055,-1.826;3.1168,-2.4513,-1.8576;-.1411,-3.5922,.6624;-.0019,-5.2955,-4.7347;-.2334,-5.0232,-3.7013;-.8384,-4.2952,-1.0929;.7914,-4.6196,-2.8473;-1.5537,-5.0887,-3.2504;-1.8572,-4.7185,-1.9426;.5006,-4.271,-1.5267;1.8269,-4.5561,-3.188;-2.3523,-5.4002,-3.9267;-2.8961,-4.7384,-1.6062;-1.0296,-3.8346,.2236;-2.1701,-3.6224,.8678;-3.0577,-4.083,.4316;-2.1675,-3.4892,2.3349;-2.2317,-3.3109,5.1329;-3.3665,-3.6882,3.0348;-.9999,-3.2076,3.0602;-1.0291,-3.1194,4.4489;-3.3977,-3.6013,4.4237;-4.2811,-3.9215,2.4837;-.0383,-3.079,2.5585;-.0998,-2.9204,4.9902;-4.3386,-3.7671,4.956;-2.2543,-3.2501,6.2245;1.4217,-3.9109,-.6215;2.1847,-3.4166,-1.0759;.513,.219,-4.7029;-3.0795,-1.6912,.0154;-2.8871,-.9405,1.174;-1.8158,-.301,1.4966;-.341,.5709,1.1984;-.4091,1.4512,-.4388;1.005,-.6874,1.4015;-.3339,1.7817,2.6281;-3.8538,-.9199,2.0807;-3.6058,-.3105,3.3378;-.1727,.7491,-1.2569;.3672,2.2387,-.4427;-1.3872,1.9362,-.6073;1.0188,-1.0473,2.444;1.9829,-.2309,1.1723;.8838,-1.5314,.7035;-.3967,1.256,3.5973;.604,2.3665,2.6234;-1.1732,2.4969,2.5644;-2.7459,-.7799,3.8425;-4.5178,-.4716,3.9275;-3.4202,.7692,3.217;4.853,-.7323,.9895;4.4218,-2.0572,.8461;3.7659,-2.7039,1.8862;3.5586,-2.0131,3.0764;4.0453,-.7249,3.2774;4.7009,-.0916,2.2264;4.5239,-2.5521,-.1215;3.3643,-3.7099,1.7587;2.69,-2.61,4.0959;3.8647,-.2172,4.2252;5.0485,.9383,2.3458;-.8082,.433,-4.2871;-1.7834,-.5368,-4.4757;-1.427,-1.7253,-5.103;-.1361,-1.95,-5.5711;.8318,-.9764,-5.3607;-1.0606,1.3534,-3.7542;-2.8054,-.3954,-4.1236;-2.4343,-2.7772,-5.2525;.1013,-2.8878,-6.0736;1.8562,-1.1573,-5.6896;2.3594,-1.9149,5.0375;2.3095,-3.7494,3.925;-2.2027,-3.6767,-6.0314;-3.4411,-2.6968,-4.577;7.0649,1.1682,-1.4861;6.0991,1.5557,-2.4601;8.4299,1.5122,-1.6835;8.8315,2.1905,-2.8079;9.1604,1.2164,-.9241;9.8858,2.4481,-2.9506;6.5508,2.2391,-3.6233;7.879,2.5471,-3.7924;5.8258,2.511,-4.3939;8.204,3.0689,-4.6979;3.3734,3.138,-3.2997;2.2519,3.5476,-4.0794;4.1739,4.1502,-2.6991;3.9094,5.4833,-2.9082;5.0071,3.863,-2.0559;4.5414,6.2395,-2.4352;2.0133,4.9335,-4.2907;2.8266,5.8846,-3.726;1.1572,5.229,-4.9051;2.6313,6.9482,-3.8917;-4.4836,-2.16,-.2896;-4.4668,-2.9588,-1.051;-5.0086,-2.5314,.6051;-5.0949,-1.3384,-.7088;-2.1839,-1.4052,-1.1636;-2.3179,-.3656,-1.5142;-1.1064,-1.5359,-.9672;-2.4363,-2.0614,-2.0104;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650393836991</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002342332361 0.000309569061 0.027626515129 0.005342302881</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030649577 -0.000515566 0.000029321 0.000146305 0.000239878 0.000317398 0.000406760 0.000429630 0.000592158 0.000809245 0.000933934 0.001057194 0.001268720 0.001345175 0.001384801 0.001421073 0.001567941 0.001820382 0.001841941 0.001961336 0.002176790 0.002407961 0.002634622 0.002677516 0.002798182 0.002988680 0.003127947 0.003470059 0.003638626 0.003920056 0.004451319 0.004711283 0.004815401 0.005080265 0.006021085 0.006082718 0.006145785 0.006608830 0.006951424 0.007753389 0.008102686 0.008230435 0.009297565 0.009539497 0.010013246 0.010659571 0.010972450 0.011076690 0.011698094 0.012220044 0.012921536 0.013138309 0.014021609 0.014563868 0.015133598 0.015488885 0.015715038 0.016248511 0.016917467 0.017463973 0.018109407 0.018332835 0.019410371 0.019575663 0.019974374 0.020805859 0.021218759 0.021412751 0.022581020 0.023138476 0.025136216 0.026051235 0.026795100 0.026989110 0.027682892 0.029422667 0.029560858 0.031460174 0.033288806 0.033518514 0.033943504 0.035786302 0.036897530 0.037663619 0.039594297 0.040031492 0.040834370 0.042339129 0.044289823 0.045180611 0.045470398 0.046983296 0.047777913 0.049220225 0.050379453 0.050874559 0.051106244 0.051282594 0.052478886 0.052644358 0.052897725 0.053105256 0.054710965 0.054906962 0.055910288 0.056256301 0.056499111 0.056660026 0.057116972 0.058529684 0.060349299 0.060878515 0.061688822 0.062152623 0.063266329 0.064440069 0.065221673 0.065916804 0.066437641 0.067873245 0.069034590 0.070256334 0.072722438 0.074461547 0.074712394 0.076209132 0.078293759 0.083630211 0.085625578 0.087089969 0.087303810 0.088198540 0.090434626 0.090961296 0.092997884 0.094603302 0.095418369 0.096409435 0.097753988 0.098072086 0.098883169 0.099971884 0.100388217 0.102435011 0.103188284 0.103399397 0.103838122 0.104362065 0.105872744 0.106910930 0.107417621 0.109706469 0.110843138 0.111893611 0.112552315 0.114879208 0.115977303 0.116362708 0.118664525 0.120351352 0.121041476 0.122905707 0.124279911 0.125306656 0.126025621 0.126291754 0.127045224 0.131980197 0.135037509 0.135773914 0.142777634 0.143608646 0.147033663 0.147539955 0.149709973 0.152508610 0.154700759 0.156186700 0.156706584 0.161516236 0.161850206 0.173558399 0.174079113 0.179943691 0.184332589 0.185967206 0.189551841 0.190328640 0.194083854 0.194471437 0.198356276 0.200162920 0.205205024 0.206899546 0.207305828 0.210196406 0.214565563 0.216548733 0.217847093 0.218813458 0.220699237 0.225243830 0.226314510 0.232140733 0.235099578 0.235479495 0.235920039 0.244570881 0.256007584 0.257248307 0.263634016 0.269857022 0.280366094 0.282950100 0.286298276 0.291601267 0.296709393 0.304341674 0.305732886 0.307287250 0.314248198 0.316686694 0.317374644 0.322165597 0.329758800 0.332813375 0.351777256 0.352155227 0.355033673 0.355762871 0.360068618 0.362804570 0.364103120 0.384451433 0.386036105 0.391980292 0.410668248 0.425614500 0.430901755 0.462278235 0.468664094 0.478280412 0.483638346 0.484277491 0.487630977 0.491398090 0.509535527 0.515296545 0.535221654 0.566996165 0.573495017 0.592323156 0.593813574 0.606416985 0.608120814 0.644661911 0.646892979 0.649413452 0.674274747 0.677807274 0.685708903 0.691889222 0.693509320 0.700076646 0.704412579 0.717327560 0.741282957 0.751240221 0.759209629 0.769534658 0.772657542 0.778792054 0.810959744 0.815316759 0.819620604 0.821641218 0.823499615 0.831588300 0.834557018 0.836055062 0.842281214 0.845711258 0.847479633 0.849588478 0.859026293 0.865888810 0.866695592 0.873951721 0.884718193 0.885711447 0.889676451 0.899442634 0.900940897 0.904061962 0.923401202 0.927371153 0.935210714 0.936925982 0.966126088 0.975895281 0.986052372 1.001148625 1.018722804 1.028017261 1.041746290 1.050837149 1.057509037 1.068771956 1.086627134 1.088684315 1.104484801 1.106680583 1.112409901 1.123925809 1.126500519 1.135942594 1.143868947 1.174630790 1.178913508 1.181139961 1.186676350 1.191393077 1.196210804 1.224602630 1.228342437 1.275044518 1.301939632 1.319515002 1.328140684 1.333209349 1.335955620 1.336284102 1.342416933 1.343128055 1.345020234 1.359132302 1.378696954 1.382938818 1.384721277 1.415543300 1.420283684 1.436409227 1.551476734 1.681606729 1.776104730</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">230</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34157041" y3="0.0335186" z3="-0.18751036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38642849" y3="0.16883797" z3="0.42135476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64395938" y3="0.43851835" z3="-0.33599551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71614619" y3="1.22359028" z3="-2.25017316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38530713" y3="0.41252766" z3="-1.17741762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71766161" y3="0.82439523" z3="-3.64994797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61504727" y3="1.7311092" z3="-3.11746017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35437603" y3="2.56387002" z3="-4.58976656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54592626" y3="1.22331902" z3="-4.35877052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47252832" y3="2.89581151" z3="-5.14644152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92586061" y3="-0.50571085" z3="-3.43825064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09902868" y3="0.01055248" z3="-0.99583686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40739508" y3="-1.1311816" z3="-2.00126655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9352764" y3="-1.0086255" z3="-1.82538801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11527009" y3="-2.45319322" z3="-1.85430402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14220645" y3="-3.59500306" z3="0.65656888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01077855" y3="-5.29134573" z3="-4.74121904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24142152" y3="-5.01928496" z3="-3.70774334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84280839" y3="-4.29403395" z3="-1.0986009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78437658" y3="-4.61866775" z3="-2.85366139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56078106" y3="-5.08382769" z3="-3.25678811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86243392" y3="-4.7147225" z3="-1.94832998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49565354" y3="-4.27163972" z3="-1.53252794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.821304" y3="-4.56035207" z3="-3.19477617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36162454" y3="-5.39119718" z3="-3.93354138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90222313" y3="-4.73065084" z3="-1.61161224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03201359" y3="-3.83452643" z3="0.21845004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17106398" y3="-3.62048662" z3="0.86480086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06004524" y3="-4.07975773" z3="0.43011857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16545914" y3="-3.48873745" z3="2.33210678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2225169" y3="-3.31434732" z3="5.1307616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36365549" y3="-3.68577752" z3="3.03441287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99617405" y3="-3.20990124" z3="3.05515601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02210244" y3="-3.12332108" z3="4.44416754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39161611" y3="-3.60022945" z3="4.42355842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28121145" y3="-3.914887" z3="2.48493296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03540666" y3="-3.08261597" z3="2.55125049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09109548" y3="-2.92735428" z3="4.9840777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33147503" y3="-3.76484429" z3="4.95762908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24244536" y3="-3.25448069" z3="6.22253593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41850232" y3="-3.9164178" z3="-0.62660227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18185871" y3="-3.42117634" z3="-1.07911085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51370067" y3="0.21303569" z3="-4.70658096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07858773" y3="-1.68778827" z3="0.01535848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88423277" y3="-0.93797061" z3="1.17452568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81252994" y3="-0.29848797" z3="1.49576064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33487459" y3="0.57069414" z3="1.20185835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39643493" y3="1.45377627" z3="-0.43394762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00868293" y3="-0.69061248" z3="1.40649828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3298907" y3="1.78000573" z3="2.63277555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84962144" y3="-0.91810541" z3="2.0828009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59999017" y3="-0.30999843" z3="3.34007086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17306731" y3="0.75082" z3="-1.25454794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39481575" y3="2.22760016" z3="-0.43857007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36660869" y3="1.95577821" z3="-0.59800072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0209526" y3="-1.05140457" z3="2.44847215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98703209" y3="-0.23469931" z3="1.17896969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88711618" y3="-1.53375762" z3="0.70713223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.3930773" y3="1.25236026" z3="3.60114526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60689849" y3="2.3665578" z3="2.62982798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17076618" y3="2.49339851" z3="2.56873951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74029071" y3="-0.78039991" z3="3.84338515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51183288" y3="-0.47119324" z3="3.9304054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4136408" y3="0.7698941" z3="3.22029262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8488981" y3="-0.72899766" z3="0.99434383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41768576" y3="-2.05388108" z3="0.85187095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76560752" y3="-2.70120307" z3="1.89408338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56226757" y3="-2.01097108" z3="3.0856414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04847365" y3="-0.72249533" z3="3.28531279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70006241" y3="-0.0886" z3="2.23197649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51756741" y3="-2.54864864" z3="-0.11579302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36385588" y3="-3.70741777" z3="1.76719137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69753419" y3="-2.60883383" z3="4.10796186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87098507" y3="-0.21522279" z3="4.23441821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04753697" y3="0.9413308" z3="2.35065633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80779006" y3="0.42933101" z3="-4.29420344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78408193" y3="-0.53951627" z3="-4.48624838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42779488" y3="-1.72843268" z3="-5.11063784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13624023" y3="-1.9558097" z3="-5.57599737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8327159" y3="-0.9837126" z3="-5.36383725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05971651" y3="1.35039703" z3="-3.76269755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80647851" y3="-0.39632282" z3="-4.13548202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43685913" y3="-2.77856423" z3="-5.26399965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10077539" y3="-2.89426939" z3="-6.07726354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85808778" y3="-1.16649399" z3="-5.68948028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36652171" y3="-1.9135311" z3="5.048511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31951012" y3="-3.74932716" z3="3.93919481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20304995" y3="-3.67948545" z3="-6.04134375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44707038" y3="-2.69523062" z3="-4.59409936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06034035" y3="1.1716091" z3="-1.48060878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09536944" y3="1.55636015" z3="-2.45652443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4253811" y3="1.51870102" z3="-1.67594386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8276901" y3="2.19790643" z3="-2.80007686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15491632" y3="1.22316627" z3="-0.91571159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88064375" y3="2.45083532" z3="-2.9430018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54774482" y3="2.23983798" z3="-3.61961233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87609668" y3="2.55187084" z3="-3.7864575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82317677" y3="2.50869756" z3="-4.39180051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20147038" y3="3.06875902" z3="-4.69270943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37010375" y3="3.13423343" z3="-3.30217955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25051819" y3="3.54219123" z3="-4.08546819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16685616" y3="4.14862842" z3="-2.69875806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90255853" y3="5.48030797" z3="-2.91079024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99867762" y3="3.86257966" z3="-2.05314904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53074021" y3="6.23894449" z3="-2.43400026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01075038" y3="4.92801557" z3="-4.29795831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82146021" y3="5.88017963" z3="-3.73173327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15597321" y3="5.2223894" z3="-4.91478204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62681911" y3="6.94261593" z3="-3.89998894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48369601" y3="-2.15444583" z3="-0.28887138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46818161" y3="-2.95148407" z3="-1.05171922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00832435" y3="-2.52678318" z3="0.60569213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0942014" y3="-1.33106169" z3="-0.70595782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18378439" y3="-1.40106575" z3="-1.16391385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31600624" y3="-0.35974676" z3="-1.5130768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10626988" y3="-1.53326115" z3="-0.96773107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43583494" y3="-2.05666154" z3="-2.01049608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3416,.0335,-.1875;7.3864,.1688,.4214;6.644,.4385,-.336;4.7161,1.2236,-2.2502;4.3853,.4125,-1.1774;2.7177,.8244,-3.6499;3.615,1.7311,-3.1175;1.3544,2.5639,-4.5898;1.5459,1.2233,-4.3588;.4725,2.8958,-5.1464;2.9259,-.5057,-3.4383;3.099,.0106,-.9958;2.4074,-1.1312,-2.0013;.9353,-1.0086,-1.8254;3.1153,-2.4532,-1.8543;-.1422,-3.595,.6566;-.0108,-5.2913,-4.7412;-.2414,-5.0193,-3.7077;-.8428,-4.294,-1.0986;.7844,-4.6187,-2.8537;-1.5608,-5.0838,-3.2568;-1.8624,-4.7147,-1.9483;.4957,-4.2716,-1.5325;1.8213,-4.5604,-3.1948;-2.3616,-5.3912,-3.9335;-2.9022,-4.7307,-1.6116;-1.032,-3.8345,.2185;-2.1711,-3.6205,.8648;-3.06,-4.0798,.4301;-2.1655,-3.4887,2.3321;-2.2225,-3.3143,5.1308;-3.3637,-3.6858,3.0344;-.9962,-3.2099,3.0552;-1.0221,-3.1233,4.4442;-3.3916,-3.6002,4.4236;-4.2812,-3.9149,2.4849;-.0354,-3.0826,2.5513;-.0911,-2.9274,4.9841;-4.3315,-3.7648,4.9576;-2.2424,-3.2545,6.2225;1.4185,-3.9164,-.6266;2.1819,-3.4212,-1.0791;.5137,.213,-4.7066;-3.0786,-1.6878,.0154;-2.8842,-.938,1.1745;-1.8125,-.2985,1.4958;-.3349,.5707,1.2019;-.3964,1.4538,-.4339;1.0087,-.6906,1.4065;-.3299,1.78,2.6328;-3.8496,-.9181,2.0828;-3.6,-.31,3.3401;-.1731,.7508,-1.2545;.3948,2.2276,-.4386;-1.3666,1.9558,-.598;1.021,-1.0514,2.4485;1.987,-.2347,1.179;.8871,-1.5338,.7071;-.3931,1.2524,3.6011;.6069,2.3666,2.6298;-1.1708,2.4934,2.5687;-2.7403,-.7804,3.8434;-4.5118,-.4712,3.9304;-3.4136,.7699,3.2203;4.8489,-.729,.9943;4.4177,-2.0539,.8519;3.7656,-2.7012,1.8941;3.5623,-2.011,3.0856;4.0485,-.7225,3.2853;4.7001,-.0886,2.232;4.5176,-2.5486,-.1158;3.3639,-3.7074,1.7672;2.6975,-2.6088,4.108;3.871,-.2152,4.2344;5.0475,.9413,2.3507;-.8078,.4293,-4.2942;-1.7841,-.5395,-4.4862;-1.4278,-1.7284,-5.1106;-.1362,-1.9558,-5.576;.8327,-.9837,-5.3638;-1.0597,1.3504,-3.7627;-2.8065,-.3963,-4.1355;-2.4369,-2.7786,-5.264;.1008,-2.8943,-6.0773;1.8581,-1.1665,-5.6895;2.3665,-1.9135,5.0485;2.3195,-3.7493,3.9392;-2.203,-3.6795,-6.0413;-3.4471,-2.6952,-4.5941;7.0603,1.1716,-1.4806;6.0954,1.5564,-2.4565;8.4254,1.5187,-1.6759;8.8277,2.1979,-2.8001;9.1549,1.2232,-.9157;9.8806,2.4508,-2.943;6.5477,2.2398,-3.6196;7.8761,2.5519,-3.7865;5.8232,2.5087,-4.3918;8.2015,3.0688,-4.6927;3.3701,3.1342,-3.3022;2.2505,3.5422,-4.0855;4.1669,4.1486,-2.6988;3.9026,5.4803,-2.9108;4.9987,3.8626,-2.0531;4.5307,6.2389,-2.434;2.0108,4.928,-4.298;2.8215,5.8802,-3.7317;1.156,5.2224,-4.9148;2.6268,6.9426,-3.9;-4.4837,-2.1544,-.2889;-4.4682,-2.9515,-1.0517;-5.0083,-2.5268,.6057;-5.0942,-1.3311,-.706;-2.1838,-1.4011,-1.1639;-2.316,-.3597,-1.5131;-1.1063,-1.5333,-.9677;-2.4358,-2.0567,-2.0105;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650395377370</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002573319238 0.000326225993 0.018752134067 0.005333504867</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030649553 -0.000237914 0.000004914 0.000115961 0.000164597 0.000315131 0.000405784 0.000431753 0.000592620 0.000809306 0.000932267 0.001057304 0.001268813 0.001345132 0.001384249 0.001421890 0.001567519 0.001820707 0.001842106 0.001961305 0.002187612 0.002409289 0.002639455 0.002676577 0.002798046 0.002998274 0.003127918 0.003471397 0.003639751 0.003918601 0.004452599 0.004711284 0.004815679 0.005081762 0.006022627 0.006084627 0.006144548 0.006608986 0.006952156 0.007754152 0.008106200 0.008231009 0.009303566 0.009539303 0.010014139 0.010662084 0.010973401 0.011083068 0.011699603 0.012223652 0.012925603 0.013137298 0.014021659 0.014566384 0.015134487 0.015492810 0.015714979 0.016252066 0.016917693 0.017465600 0.018109432 0.018332455 0.019413308 0.019576259 0.019974290 0.020806288 0.021219147 0.021417070 0.022582551 0.023138764 0.025136356 0.026056884 0.026795086 0.026993382 0.027682978 0.029440682 0.029565936 0.031469457 0.033288831 0.033531966 0.033944651 0.035786296 0.036899892 0.037663735 0.039593874 0.040033802 0.040834867 0.042339145 0.044289963 0.045180652 0.045470287 0.046988691 0.047777925 0.049222614 0.050381599 0.050886692 0.051118495 0.051283916 0.052479225 0.052644391 0.052899724 0.053108804 0.054711497 0.054907408 0.055913388 0.056256415 0.056500521 0.056659907 0.057124186 0.058567185 0.060352947 0.060882444 0.061689986 0.062167892 0.063270363 0.064447256 0.065234941 0.065917417 0.066438767 0.067879978 0.069040377 0.070256599 0.072724682 0.074467676 0.074712337 0.076216678 0.078294105 0.083645307 0.085667411 0.087092861 0.087304101 0.088237567 0.090436540 0.090961356 0.092999973 0.094603687 0.095435100 0.096409627 0.097793450 0.098178044 0.098883181 0.099973788 0.100400969 0.102435075 0.103189166 0.103400948 0.103857087 0.104366836 0.105872663 0.106912469 0.107421819 0.109708253 0.110856758 0.111893720 0.112552396 0.114882403 0.116018956 0.116384965 0.118667949 0.120359862 0.121045779 0.122918341 0.124288733 0.125329110 0.126025530 0.126291846 0.127045183 0.131980979 0.135041928 0.135776683 0.142777510 0.143629429 0.147034033 0.147560165 0.149711285 0.152512467 0.154700481 0.156189071 0.156708180 0.161517009 0.161856167 0.173563915 0.174093179 0.179964320 0.184335982 0.186050659 0.189551121 0.190341298 0.194086177 0.194525316 0.198364468 0.200168267 0.205209105 0.206899500 0.207308659 0.210200899 0.214567221 0.216558149 0.217862389 0.218855742 0.220700985 0.225244382 0.226334004 0.232140727 0.235108601 0.235484287 0.235920970 0.244573312 0.256009976 0.257248548 0.263640208 0.269862392 0.280367007 0.282960778 0.286299159 0.291613908 0.296710968 0.304345696 0.305732945 0.307287259 0.314260023 0.316689003 0.317375958 0.322175466 0.329759808 0.332818716 0.351777185 0.352157790 0.355063004 0.355763254 0.360068593 0.362815623 0.364106050 0.384453710 0.386037759 0.391999619 0.410672815 0.425625698 0.430907720 0.462288502 0.468666559 0.478280375 0.483638472 0.484279488 0.487638899 0.491399940 0.509538220 0.515312948 0.535226126 0.567162500 0.573516651 0.592324072 0.593825614 0.606417635 0.608124439 0.644664847 0.646910843 0.649426554 0.674275434 0.677807802 0.685752980 0.691889193 0.693522254 0.700077541 0.704414303 0.717332533 0.741290983 0.751241230 0.759227489 0.769558877 0.772657763 0.778797220 0.810959698 0.815317353 0.819625148 0.821642120 0.823517226 0.831596190 0.834594311 0.836073345 0.842296616 0.845717520 0.847482832 0.849628433 0.859028809 0.865889121 0.866700892 0.873952959 0.884865558 0.885715879 0.889678797 0.899465182 0.900941350 0.904062368 0.923403610 0.927399932 0.935284333 0.936926339 0.966141582 0.975901583 0.986052923 1.001149624 1.018810480 1.028029283 1.041772978 1.050848628 1.057511944 1.068792873 1.086628249 1.088685464 1.104493590 1.106781583 1.112422645 1.123946707 1.126957660 1.135959617 1.143894056 1.174662185 1.178926417 1.181148824 1.186715053 1.191396317 1.196210784 1.224604207 1.228343347 1.275058100 1.301977404 1.319515076 1.328149076 1.333217120 1.336070564 1.336290757 1.342417475 1.343128229 1.345020389 1.359135381 1.378707649 1.382945701 1.384843687 1.415548498 1.420288623 1.436465677 1.551476889 1.681608985 1.776131485</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">231</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33510165" y3="0.03708091" z3="-0.18307335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37851391" y3="0.17589582" z3="0.43094907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63776828" y3="0.44417547" z3="-0.32859865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71393027" y3="1.22519402" z3="-2.24837065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38087121" y3="0.41423442" z3="-1.17569501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71912447" y3="0.82377711" z3="-3.65362534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61486631" y3="1.73170255" z3="-3.11891569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35906893" y3="2.56321612" z3="-4.59993749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54973303" y3="1.2216718" z3="-4.36706467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47912424" y3="2.89386684" z3="-5.16052332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92621758" y3="-0.50607784" z3="-3.43985981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0943258" y3="0.01159712" z3="-0.99664205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40492543" y3="-1.13045822" z3="-2.00340237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9324819" y3="-1.00800793" z3="-1.83044989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11294368" y3="-2.45231671" z3="-1.85476631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1415415" y3="-3.5986425" z3="0.65393706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02695228" y3="-5.28123718" z3="-4.74890161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25357832" y3="-5.01329424" z3="-3.71333546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84720115" y3="-4.29605311" z3="-1.09968205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77530162" y3="-4.61501997" z3="-2.86139883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57222154" y3="-5.07939227" z3="-3.2578645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86990732" y3="-4.71488293" z3="-1.94708229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49033177" y3="-4.27201909" z3="-1.53813688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80959861" y3="-4.55190901" z3="-3.20595786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37324144" y3="-5.38779388" z3="-3.93256572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90738736" y3="-4.73567011" z3="-1.60637069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03234961" y3="-3.8385817" z3="0.21862769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16992366" y3="-3.62196589" z3="0.86698722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06022028" y3="-4.08139747" z3="0.43522578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16055107" y3="-3.48928053" z3="2.33434049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21132466" y3="-3.31306925" z3="5.1329775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35710458" y3="-3.6850224" z3="3.03946253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98863427" y3="-3.21242193" z3="3.0548282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01153203" y3="-3.12465184" z3="4.44378582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38149891" y3="-3.5993184" z3="4.42867553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2749363" y3="-3.91508001" z3="2.4922378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02850726" y3="-3.08751543" z3="2.54914588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07979291" y3="-2.92901753" z3="4.98193748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31999887" y3="-3.76356424" z3="4.96510669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2282558" y3="-3.25315855" z3="6.22478696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41435938" y3="-3.91758384" z3="-0.63388471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.178217" y3="-3.42190288" z3="-1.08617605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51631183" y3="0.21273207" z3="-4.71314949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07567672" y3="-1.69135976" z3="0.01623366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88462209" y3="-0.94025087" z3="1.17493372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81530185" y3="-0.29751318" z3="1.49702618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33578876" y3="0.56819908" z3="1.20452905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39276371" y3="1.45354544" z3="-0.43028873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00609823" y3="-0.69466979" z3="1.40531814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32798475" y3="1.77408408" z3="2.63838195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8512624" y3="-0.92195126" z3="2.08150129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60443817" y3="-0.31280745" z3="3.33898749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1776835" y3="0.74927317" z3="-1.25231574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.40540539" y3="2.21920083" z3="-0.43604932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.35789827" y3="1.96575172" z3="-0.59192537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01944513" y3="-1.05850185" z3="2.44632305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9842669" y3="-0.23833371" z3="1.17822487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8836772" y3="-1.53605044" z3="0.70406527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38815627" y3="1.24401806" z3="3.6052384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60843967" y3="2.36118548" z3="2.63500176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16945579" y3="2.4870458" z3="2.57882738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.74118837" y3="-0.77782273" z3="3.84151325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51447758" y3="-0.48007356" z3="3.93008811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.42569886" y3="0.76791451" z3="3.21906421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84235107" y3="-0.72510051" z3="0.99894375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41023967" y3="-2.04988559" z3="0.85678842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76214247" y3="-2.6980213" z3="1.90086653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56242014" y3="-2.00855088" z3="3.09310933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04878375" y3="-0.71982321" z3="3.29198738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69720096" y3="-0.08518071" z3="2.23724389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50670642" y3="-2.54404659" z3="-0.11181765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36126166" y3="-3.70457464" z3="1.77554268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70314726" y3="-2.60843204" z3="4.11885367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87444688" y3="-0.21317732" z3="4.2416858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04573175" y3="0.94461157" z3="2.35577713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80480389" y3="0.4314022" z3="-4.29965922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78294164" y3="-0.53522937" z3="-4.49042184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42921925" y3="-1.72510769" z3="-5.1164798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13786969" y3="-1.95508283" z3="-5.58056446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83300173" y3="-0.98490796" z3="-5.3685762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05476664" y3="1.35324356" z3="-3.76823736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80530579" y3="-0.38994635" z3="-4.14060031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44064513" y3="-2.77262032" z3="-5.27033389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09715586" y3="-2.89420706" z3="-6.08196156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85782033" y3="-1.16999213" z3="-5.69431374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37876074" y3="-1.91541746" z3="5.06377343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3235698" y3="-3.74842862" z3="3.94932081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20847872" y3="-3.67523976" z3="-6.04547089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45146098" y3="-2.6851606" z3="-4.60166671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05639074" y3="1.17481381" z3="-1.47364149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0935239" y3="1.55759843" z3="-2.45236983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42151731" y3="1.52014635" z3="-1.6667505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82612619" y3="2.19543502" z3="-2.791675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1495351" y3="1.22778708" z3="-0.90359465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88070021" y3="2.45483355" z3="-2.93099217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54847386" y3="2.23820859" z3="-3.61577432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87670072" y3="2.54758503" z3="-3.7807736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82596627" y3="2.50675949" z3="-4.38990951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20424483" y3="3.06745152" z3="-4.68650206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37121555" y3="3.13450797" z3="-3.30711917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2546737" y3="3.54157153" z3="-4.09533592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16692124" y3="4.14890026" z3="-2.70354418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90287924" y3="5.48122127" z3="-2.91754721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99593993" y3="3.86386838" z3="-2.05392604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53074792" y3="6.23914361" z3="-2.44146548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01712854" y3="4.92648906" z3="-4.31237315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8256795" y3="5.87964905" z3="-3.7441499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16513553" y3="5.21979957" z3="-4.93353417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63081925" y3="6.9426531" z3="-3.9138027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47986014" y3="-2.15984777" z3="-0.28936531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46287253" y3="-2.95513964" z3="-1.05398798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0036327" y3="-2.53542536" z3="0.60430911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09231205" y3="-1.33704578" z3="-0.70459613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1802072" y3="-1.40280462" z3="-1.16224647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31468546" y3="-0.36260547" z3="-1.51169711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1027567" y3="-1.53348581" z3="-0.96566491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43196941" y3="-2.05824708" z3="-2.01005817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3351,.0371,-.1831;7.3785,.1759,.4309;6.6378,.4442,-.3286;4.7139,1.2252,-2.2484;4.3809,.4142,-1.1757;2.7191,.8238,-3.6536;3.6149,1.7317,-3.1189;1.3591,2.5632,-4.5999;1.5497,1.2217,-4.3671;.4791,2.8939,-5.1605;2.9262,-.5061,-3.4399;3.0943,.0116,-.9966;2.4049,-1.1305,-2.0034;.9325,-1.008,-1.8304;3.1129,-2.4523,-1.8548;-.1415,-3.5986,.6539;-.027,-5.2812,-4.7489;-.2536,-5.0133,-3.7133;-.8472,-4.2961,-1.0997;.7753,-4.615,-2.8614;-1.5722,-5.0794,-3.2579;-1.8699,-4.7149,-1.9471;.4903,-4.272,-1.5381;1.8096,-4.5519,-3.206;-2.3732,-5.3878,-3.9326;-2.9074,-4.7357,-1.6064;-1.0323,-3.8386,.2186;-2.1699,-3.622,.867;-3.0602,-4.0814,.4352;-2.1606,-3.4893,2.3343;-2.2113,-3.3131,5.133;-3.3571,-3.685,3.0395;-.9886,-3.2124,3.0548;-1.0115,-3.1247,4.4438;-3.3815,-3.5993,4.4287;-4.2749,-3.9151,2.4922;-.0285,-3.0875,2.5491;-.0798,-2.929,4.9819;-4.32,-3.7636,4.9651;-2.2283,-3.2532,6.2248;1.4144,-3.9176,-.6339;2.1782,-3.4219,-1.0862;.5163,.2127,-4.7131;-3.0757,-1.6914,.0162;-2.8846,-.9403,1.1749;-1.8153,-.2975,1.497;-.3358,.5682,1.2045;-.3928,1.4535,-.4303;1.0061,-.6947,1.4053;-.328,1.7741,2.6384;-3.8513,-.922,2.0815;-3.6044,-.3128,3.339;-.1777,.7493,-1.2523;.4054,2.2192,-.436;-1.3579,1.9658,-.5919;1.0194,-1.0585,2.4463;1.9843,-.2383,1.1782;.8837,-1.5361,.7041;-.3882,1.244,3.6052;.6084,2.3612,2.635;-1.1695,2.487,2.5788;-2.7412,-.7778,3.8415;-4.5145,-.4801,3.9301;-3.4257,.7679,3.2191;4.8424,-.7251,.9989;4.4102,-2.0499,.8568;3.7621,-2.698,1.9009;3.5624,-2.0086,3.0931;4.0488,-.7198,3.292;4.6972,-.0852,2.2372;4.5067,-2.544,-.1118;3.3613,-3.7046,1.7755;2.7031,-2.6084,4.1189;3.8744,-.2132,4.2417;5.0457,.9446,2.3558;-.8048,.4314,-4.2997;-1.7829,-.5352,-4.4904;-1.4292,-1.7251,-5.1165;-.1379,-1.9551,-5.5806;.833,-.9849,-5.3686;-1.0548,1.3532,-3.7682;-2.8053,-.3899,-4.1406;-2.4406,-2.7726,-5.2703;.0972,-2.8942,-6.082;1.8578,-1.17,-5.6943;2.3788,-1.9154,5.0638;2.3236,-3.7484,3.9493;-2.2085,-3.6752,-6.0455;-3.4515,-2.6852,-4.6017;7.0564,1.1748,-1.4736;6.0935,1.5576,-2.4524;8.4215,1.5201,-1.6668;8.8261,2.1954,-2.7917;9.1495,1.2278,-.9036;9.8807,2.4548,-2.931;6.5485,2.2382,-3.6158;7.8767,2.5476,-3.7808;5.826,2.5068,-4.3899;8.2042,3.0675,-4.6865;3.3712,3.1345,-3.3071;2.2547,3.5416,-4.0953;4.1669,4.1489,-2.7035;3.9029,5.4812,-2.9175;4.9959,3.8639,-2.0539;4.5307,6.2391,-2.4415;2.0171,4.9265,-4.3124;2.8257,5.8796,-3.7441;1.1651,5.2198,-4.9335;2.6308,6.9427,-3.9138;-4.4799,-2.1598,-.2894;-4.4629,-2.9551,-1.054;-5.0036,-2.5354,.6043;-5.0923,-1.337,-.7046;-2.1802,-1.4028,-1.1622;-2.3147,-.3626,-1.5117;-1.1028,-1.5335,-.9657;-2.432,-2.0582,-2.0101;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650395296934</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002596202821 0.000309439835 0.017127961504 0.005342043672</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030650163 -0.000491843 0.000027407 0.000135456 0.000292444 0.000318064 0.000407125 0.000429514 0.000591888 0.000809572 0.000934750 0.001056907 0.001273809 0.001345164 0.001384180 0.001421414 0.001567801 0.001820949 0.001846435 0.001961623 0.002186531 0.002410567 0.002646911 0.002677113 0.002800795 0.003008850 0.003128535 0.003474961 0.003640218 0.003918611 0.004458786 0.004711505 0.004819338 0.005083380 0.006022495 0.006084981 0.006144719 0.006609399 0.006955158 0.007754836 0.008110129 0.008232180 0.009309975 0.009540231 0.010014372 0.010661029 0.010973408 0.011086745 0.011705167 0.012229452 0.012927320 0.013137235 0.014021811 0.014567086 0.015134497 0.015495636 0.015715038 0.016258129 0.016917771 0.017471227 0.018109622 0.018334074 0.019417027 0.019576225 0.019974576 0.020806090 0.021219548 0.021424757 0.022584382 0.023139715 0.025138962 0.026063465 0.026795178 0.026995431 0.027683071 0.029455673 0.029573743 0.031480188 0.033289290 0.033544236 0.033945448 0.035786599 0.036900345 0.037664086 0.039594006 0.040037985 0.040835287 0.042339308 0.044290035 0.045180731 0.045470463 0.047001796 0.047781221 0.049223869 0.050389291 0.050902795 0.051124332 0.051287575 0.052479717 0.052645233 0.052901183 0.053111366 0.054712403 0.054908759 0.055917704 0.056256404 0.056502906 0.056660161 0.057132203 0.058613653 0.060359366 0.060883424 0.061692990 0.062181894 0.063273775 0.064453960 0.065244716 0.065917938 0.066442002 0.067888663 0.069042402 0.070256641 0.072726716 0.074474703 0.074713182 0.076226859 0.078294268 0.083665947 0.085720486 0.087093522 0.087312171 0.088271538 0.090438825 0.090962011 0.093006653 0.094603792 0.095441008 0.096409999 0.097817938 0.098325204 0.098886618 0.099978775 0.100422370 0.102435283 0.103191518 0.103403976 0.103874218 0.104368996 0.105874229 0.106913563 0.107422082 0.109708563 0.110864941 0.111893570 0.112553880 0.114888895 0.116049178 0.116409436 0.118669264 0.120374690 0.121051211 0.122926770 0.124301076 0.125347302 0.126025538 0.126292938 0.127045148 0.131981239 0.135046228 0.135780615 0.142777751 0.143637621 0.147034323 0.147569965 0.149711852 0.152524836 0.154700408 0.156190939 0.156710627 0.161517919 0.161864099 0.173568049 0.174099659 0.179982970 0.184340385 0.186111295 0.189551247 0.190342517 0.194087043 0.194572422 0.198377174 0.200170735 0.205209196 0.206899925 0.207308732 0.210204795 0.214577746 0.216563388 0.217874422 0.218867283 0.220701595 0.225244980 0.226355137 0.232140799 0.235113831 0.235485712 0.235921937 0.244576357 0.256011667 0.257248992 0.263649836 0.269866331 0.280367222 0.282977511 0.286300474 0.291621848 0.296712210 0.304351113 0.305733182 0.307287889 0.314267661 0.316690317 0.317376564 0.322178985 0.329759908 0.332824942 0.351778245 0.352160597 0.355081036 0.355763354 0.360076547 0.362819170 0.364109268 0.384454127 0.386038644 0.392021917 0.410674330 0.425642643 0.430910628 0.462300766 0.468667225 0.478282748 0.483638504 0.484283258 0.487652311 0.491401149 0.509539177 0.515329475 0.535233571 0.567349389 0.573553898 0.592326060 0.593838354 0.606420926 0.608125032 0.644666524 0.646927435 0.649431610 0.674278965 0.677808268 0.685794946 0.691889571 0.693521238 0.700077595 0.704415494 0.717341317 0.741299813 0.751241522 0.759228507 0.769581768 0.772658465 0.778801591 0.810960831 0.815317493 0.819625096 0.821642532 0.823529956 0.831608745 0.834619560 0.836096547 0.842303029 0.845723558 0.847484854 0.849663073 0.859036708 0.865889781 0.866707141 0.873958831 0.885000822 0.885715823 0.889684805 0.899481077 0.900941284 0.904063383 0.923406207 0.927404999 0.935352509 0.936931814 0.966155920 0.975910101 0.986052908 1.001150864 1.018873441 1.028051216 1.041794339 1.050854964 1.057517123 1.068805146 1.086628769 1.088685717 1.104494614 1.106862846 1.112434076 1.124028523 1.127417194 1.135978690 1.143940127 1.174688060 1.178931373 1.181152091 1.186749178 1.191397394 1.196211047 1.224609877 1.228343810 1.275067120 1.302006851 1.319521144 1.328149228 1.333219596 1.336147617 1.336296774 1.342418912 1.343128564 1.345020356 1.359141795 1.378712635 1.382948867 1.384883642 1.415567831 1.420291104 1.436496048 1.551477611 1.681622879 1.776168417</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">232</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33154678" y3="0.04036732" z3="-0.1833257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37374515" y3="0.17587898" z3="0.43393586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63468053" y3="0.44446394" z3="-0.3271474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71525463" y3="1.22666759" z3="-2.250845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37943256" y3="0.41788105" z3="-1.17774836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72107215" y3="0.82862117" z3="-3.65733175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61858675" y3="1.73446462" z3="-3.12366348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36618261" y3="2.5688525" z3="-4.60808986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55291594" y3="1.22845905" z3="-4.37149568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4872534" y3="2.90119865" z3="-5.16909763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92561262" y3="-0.5014348" z3="-3.44276961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09225056" y3="0.01697783" z3="-1.0001508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40269118" y3="-1.12499574" z3="-2.00675351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93028507" y3="-1.00164485" z3="-1.83480678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10963981" y3="-2.44738224" z3="-1.85738164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13999891" y3="-3.60633904" z3="0.65719813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0347984" y3="-5.27336867" z3="-4.75031321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25976352" y3="-5.00911739" z3="-3.71349166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84812698" y3="-4.3014461" z3="-1.09650656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76943265" y3="-4.60799209" z3="-2.86405618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57582849" y3="-5.08343216" z3="-3.25401791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.87089093" y3="-4.72367741" z3="-1.9413084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48744669" y3="-4.26989034" z3="-1.53903074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80346998" y3="-4.54163703" z3="-3.21203786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37960953" y3="-5.39069181" z3="-3.92739303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90821161" y3="-4.74775723" z3="-1.59711873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03152313" y3="-3.8463595" z3="0.2228229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16840997" y3="-3.62928567" z3="0.8722907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0590041" y3="-4.08987453" z3="0.44228375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15748831" y3="-3.49445984" z3="2.33951667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20637596" y3="-3.31026455" z3="5.13772784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35317488" y3="-3.68999456" z3="3.04637099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9860571" y3="-3.21348851" z3="3.05807711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00775605" y3="-3.1221703" z3="4.44683755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37710746" y3="-3.5995716" z3="4.43522763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27214474" y3="-3.92170596" z3="2.50067747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02684938" y3="-3.08845051" z3="2.5507935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07525226" y3="-2.92512573" z3="4.98383208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3155252" y3="-3.76229973" z3="4.97286195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22305758" y3="-3.24641286" z3="6.22924219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41338783" y3="-3.91461823" z3="-0.63666734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17518329" y3="-3.41718918" z3="-1.08990545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51788759" y3="0.22004822" z3="-4.7168244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07589413" y3="-1.70110682" z3="0.0181891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8884806" y3="-0.94777881" z3="1.17662708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82244838" y3="-0.29965964" z3="1.49904995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34144663" y3="0.56446913" z3="1.20451299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40256342" y3="1.45228471" z3="-0.42840124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00127636" y3="-0.69867981" z3="1.40156344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33082608" y3="1.76822942" z3="2.64000177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85618174" y3="-0.93211725" z3="2.08239684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61432234" y3="-0.31830107" z3="3.33844577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18543941" y3="0.7509665" z3="-1.25163669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39422194" y3="2.21967663" z3="-0.43260493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36894586" y3="1.96191802" z3="-0.58885848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01678606" y3="-1.06256552" z3="2.44246857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97907126" y3="-0.24157924" z3="1.17289593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8788396" y3="-1.54007056" z3="0.70048767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39323848" y3="1.23696444" z3="3.60649453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.6071852" y3="2.35291435" z3="2.63749663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17046611" y3="2.48373229" z3="2.58069772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75073882" y3="-0.77912564" z3="3.84423306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52556912" y3="-0.48681787" z3="3.92782091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43823699" y3="0.76319573" z3="3.21602962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83691156" y3="-0.72141914" z3="0.99805893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40527551" y3="-2.04628311" z3="0.85568489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75901243" y3="-2.69548965" z3="1.90027137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56107055" y3="-2.00704515" z3="3.09377829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04543121" y3="-0.71771587" z3="3.29203776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6916988" y3="-0.08201377" z3="2.23651454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50166925" y3="-2.54002338" z3="-0.11291751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35879626" y3="-3.70244958" z3="1.7747329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70545411" y3="-2.60899675" z3="4.12141564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8720217" y3="-0.21198556" z3="4.2425987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03887535" y3="0.94800353" z3="2.35462579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80224598" y3="0.43950945" z3="-4.30109821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78105705" y3="-0.5273869" z3="-4.48819995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42921128" y3="-1.71771087" z3="-5.11312592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13926189" y3="-1.9482635" z3="-5.58184908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83257487" y3="-0.97815681" z3="-5.37267581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05077588" y3="1.3619359" z3="-3.76996542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80206485" y3="-0.38163003" z3="-4.13444294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4413896" y3="-2.76532413" z3="-5.26346695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09422634" y3="-2.88768009" z3="-6.08297167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85676434" y3="-1.16364259" z3="-5.70068265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38433051" y3="-1.91827738" z3="5.0686884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32503661" y3="-3.74851155" z3="3.95060249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21039021" y3="-3.66908489" z3="-6.03848321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45153056" y3="-2.67663794" z3="-4.59420065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05640183" y3="1.17463091" z3="-1.47159957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09575161" y3="1.55749707" z3="-2.45247048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42270228" y3="1.52012627" z3="-1.66206358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.830436" y3="2.19575522" z3="-2.7865096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14866785" y3="1.22597681" z3="-0.89788037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88418003" y3="2.446552" z3="-2.92606472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55375113" y3="2.23730411" z3="-3.61565496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88324557" y3="2.54762873" z3="-3.77790242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8326162" y3="2.5046156" z3="-4.39161178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2129292" y3="3.06127113" z3="-4.68442519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37807196" y3="3.13775708" z3="-3.31387026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26330995" y3="3.54632609" z3="-4.10375414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17468678" y3="4.15188054" z3="-2.71030733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91483585" y3="5.4836581" z3="-2.92806415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00242357" y3="3.86588454" z3="-2.05945003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54270598" y3="6.24204817" z3="-2.45080427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02838694" y3="4.93214708" z3="-4.32235331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83898371" y3="5.88387258" z3="-3.75572824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17751336" y3="5.22665836" z3="-4.94450192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64794721" y3="6.94628877" z3="-3.92855435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47876997" y3="-2.17275796" z3="-0.28939676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45881788" y3="-2.9680743" z3="-1.05402198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00347022" y3="-2.54933685" z3="0.60338181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09183444" y3="-1.35082383" z3="-0.70551275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17979984" y3="-1.41030562" z3="-1.15936769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31476454" y3="-0.36905935" z3="-1.50746796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10225842" y3="-1.53989453" z3="-0.96145418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42797609" y3="-2.06503222" z3="-2.00788664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3315,.0404,-.1833;7.3737,.1759,.4339;6.6347,.4445,-.3271;4.7153,1.2267,-2.2508;4.3794,.4179,-1.1777;2.7211,.8286,-3.6573;3.6186,1.7345,-3.1237;1.3662,2.5689,-4.6081;1.5529,1.2285,-4.3715;.4873,2.9012,-5.1691;2.9256,-.5014,-3.4428;3.0923,.017,-1.0002;2.4027,-1.125,-2.0068;.9303,-1.0016,-1.8348;3.1096,-2.4474,-1.8574;-.14,-3.6063,.6572;-.0348,-5.2734,-4.7503;-.2598,-5.0091,-3.7135;-.8481,-4.3014,-1.0965;.7694,-4.608,-2.8641;-1.5758,-5.0834,-3.254;-1.8709,-4.7237,-1.9413;.4874,-4.2699,-1.539;1.8035,-4.5416,-3.212;-2.3796,-5.3907,-3.9274;-2.9082,-4.7478,-1.5971;-1.0315,-3.8464,.2228;-2.1684,-3.6293,.8723;-3.059,-4.0899,.4423;-2.1575,-3.4945,2.3395;-2.2064,-3.3103,5.1377;-3.3532,-3.69,3.0464;-.9861,-3.2135,3.0581;-1.0078,-3.1222,4.4468;-3.3771,-3.5996,4.4352;-4.2721,-3.9217,2.5007;-.0268,-3.0885,2.5508;-.0753,-2.9251,4.9838;-4.3155,-3.7623,4.9729;-2.2231,-3.2464,6.2292;1.4134,-3.9146,-.6367;2.1752,-3.4172,-1.0899;.5179,.22,-4.7168;-3.0759,-1.7011,.0182;-2.8885,-.9478,1.1766;-1.8224,-.2997,1.499;-.3414,.5645,1.2045;-.4026,1.4523,-.4284;1.0013,-.6987,1.4016;-.3308,1.7682,2.64;-3.8562,-.9321,2.0824;-3.6143,-.3183,3.3384;-.1854,.751,-1.2516;.3942,2.2197,-.4326;-1.3689,1.9619,-.5889;1.0168,-1.0626,2.4425;1.9791,-.2416,1.1729;.8788,-1.5401,.7005;-.3932,1.237,3.6065;.6072,2.3529,2.6375;-1.1705,2.4837,2.5807;-2.7507,-.7791,3.8442;-4.5256,-.4868,3.9278;-3.4382,.7632,3.216;4.8369,-.7214,.9981;4.4053,-2.0463,.8557;3.759,-2.6955,1.9003;3.5611,-2.007,3.0938;4.0454,-.7177,3.292;4.6917,-.082,2.2365;4.5017,-2.54,-.1129;3.3588,-3.7024,1.7747;2.7055,-2.609,4.1214;3.872,-.212,4.2426;5.0389,.948,2.3546;-.8022,.4395,-4.3011;-1.7811,-.5274,-4.4882;-1.4292,-1.7177,-5.1131;-.1393,-1.9483,-5.5818;.8326,-.9782,-5.3727;-1.0508,1.3619,-3.77;-2.8021,-.3816,-4.1344;-2.4414,-2.7653,-5.2635;.0942,-2.8877,-6.083;1.8568,-1.1636,-5.7007;2.3843,-1.9183,5.0687;2.325,-3.7485,3.9506;-2.2104,-3.6691,-6.0385;-3.4515,-2.6766,-4.5942;7.0564,1.1746,-1.4716;6.0958,1.5575,-2.4525;8.4227,1.5201,-1.6621;8.8304,2.1958,-2.7865;9.1487,1.226,-.8979;9.8842,2.4466,-2.9261;6.5538,2.2373,-3.6157;7.8832,2.5476,-3.7779;5.8326,2.5046,-4.3916;8.2129,3.0613,-4.6844;3.3781,3.1378,-3.3139;2.2633,3.5463,-4.1038;4.1747,4.1519,-2.7103;3.9148,5.4837,-2.9281;5.0024,3.8659,-2.0595;4.5427,6.242,-2.4508;2.0284,4.9321,-4.3224;2.839,5.8839,-3.7557;1.1775,5.2267,-4.9445;2.6479,6.9463,-3.9286;-4.4788,-2.1728,-.2894;-4.4588,-2.9681,-1.054;-5.0035,-2.5493,.6034;-5.0918,-1.3508,-.7055;-2.1798,-1.4103,-1.1594;-2.3148,-.3691,-1.5075;-1.1023,-1.5399,-.9615;-2.428,-2.065,-2.0079;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650399647151</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002826106817 0.000320156651 0.021409982863 0.005335935560</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030652969 -0.000658063 0.000054360 0.000144638 0.000314041 0.000377881 0.000406374 0.000438134 0.000593904 0.000809501 0.000936926 0.001056959 0.001272669 0.001345218 0.001384152 0.001421344 0.001567945 0.001820958 0.001846297 0.001961928 0.002187175 0.002410281 0.002652390 0.002679301 0.002800247 0.003012976 0.003128167 0.003477831 0.003640158 0.003918600 0.004461529 0.004711484 0.004820253 0.005083901 0.006022419 0.006085401 0.006144748 0.006609627 0.006959466 0.007757138 0.008110827 0.008232830 0.009310138 0.009540556 0.010014358 0.010660762 0.010973397 0.011089568 0.011715078 0.012233414 0.012928985 0.013137912 0.014021914 0.014567137 0.015135288 0.015497215 0.015715277 0.016262098 0.016919745 0.017474815 0.018110305 0.018342594 0.019420755 0.019576170 0.019976972 0.020806166 0.021220398 0.021433072 0.022586320 0.023141288 0.025140482 0.026074353 0.026795224 0.026996757 0.027683599 0.029465640 0.029584442 0.031488927 0.033290437 0.033554443 0.033946667 0.035786892 0.036900598 0.037665372 0.039595120 0.040046108 0.040836285 0.042339516 0.044290160 0.045181228 0.045471845 0.047018985 0.047786222 0.049225186 0.050394803 0.050919229 0.051130776 0.051294815 0.052480204 0.052646797 0.052902560 0.053112249 0.054712598 0.054910371 0.055923454 0.056256418 0.056506042 0.056660471 0.057140176 0.058668318 0.060365285 0.060883909 0.061696403 0.062197361 0.063275310 0.064460973 0.065255163 0.065918370 0.066452024 0.067897004 0.069043383 0.070256758 0.072727599 0.074483219 0.074717516 0.076237593 0.078298354 0.083689379 0.085794918 0.087093608 0.087328510 0.088304851 0.090440431 0.090963800 0.093018339 0.094603878 0.095445527 0.096410348 0.097829022 0.098480733 0.098893441 0.099989672 0.100451657 0.102435486 0.103193214 0.103408997 0.103893435 0.104369101 0.105881783 0.106915641 0.107422653 0.109708548 0.110870167 0.111893731 0.112558000 0.114894661 0.116071797 0.116436367 0.118670700 0.120392210 0.121063494 0.122934866 0.124314505 0.125368937 0.126025548 0.126297750 0.127045418 0.131981378 0.135054973 0.135781856 0.142778355 0.143639007 0.147034774 0.147573904 0.149711921 0.152540819 0.154700520 0.156191470 0.156713597 0.161518366 0.161872419 0.173572291 0.174103415 0.180000542 0.184344298 0.186149743 0.189552528 0.190342605 0.194088578 0.194611979 0.198389978 0.200175989 0.205209056 0.206900005 0.207310393 0.210207307 0.214597752 0.216568162 0.217890434 0.218872064 0.220701622 0.225245001 0.226379105 0.232140832 0.235116850 0.235486083 0.235921844 0.244580913 0.256013158 0.257249647 0.263656638 0.269868440 0.280367244 0.282995807 0.286302127 0.291628289 0.296712719 0.304354727 0.305733337 0.307290087 0.314273780 0.316691516 0.317376989 0.322179324 0.329760136 0.332832219 0.351778397 0.352160754 0.355090102 0.355763476 0.360089795 0.362820833 0.364117358 0.384454369 0.386048138 0.392048297 0.410677078 0.425657913 0.430913193 0.462306166 0.468667218 0.478290975 0.483638960 0.484289631 0.487678079 0.491403416 0.509540296 0.515346223 0.535242333 0.567542192 0.573609230 0.592331037 0.593854187 0.606426709 0.608126935 0.644669739 0.646951276 0.649432266 0.674281051 0.677810716 0.685826820 0.691890356 0.693523496 0.700078229 0.704415827 0.717352118 0.741310029 0.751241755 0.759228513 0.769594246 0.772662233 0.778804603 0.810966745 0.815317504 0.819625093 0.821642560 0.823532708 0.831612122 0.834651481 0.836121461 0.842309395 0.845732998 0.847493220 0.849684033 0.859049848 0.865890735 0.866707272 0.873964740 0.885119266 0.885717875 0.889689462 0.899518553 0.900941353 0.904066727 0.923409944 0.927417954 0.935432781 0.936934159 0.966160190 0.975928468 0.986052928 1.001152204 1.018944008 1.028078594 1.041819364 1.050859130 1.057521945 1.068810854 1.086629111 1.088688100 1.104494680 1.106936681 1.112444635 1.124117509 1.127950647 1.135993272 1.143989597 1.174713589 1.178932800 1.181152801 1.186781817 1.191397470 1.196211089 1.224612736 1.228343938 1.275069769 1.302039522 1.319531005 1.328155175 1.333219969 1.336218644 1.336297728 1.342429953 1.343128767 1.345023959 1.359146062 1.378722128 1.382950940 1.384913634 1.415576340 1.420291370 1.436547165 1.551479025 1.681624368 1.776209639</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">233</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3330632" y3="0.04141062" z3="-0.18632955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37589242" y3="0.17470929" z3="0.43098538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63717156" y3="0.4449409" z3="-0.32981148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7186788" y3="1.22986812" z3="-2.25338553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38142125" y3="0.42087903" z3="-1.18041349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72377373" y3="0.83350232" z3="-3.65977229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62249138" y3="1.73900513" z3="-3.12598219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3698126" y3="2.57633477" z3="-4.60874487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55545451" y3="1.23465646" z3="-4.37320644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49063022" y3="2.90951026" z3="-5.16901765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92666483" y3="-0.49680586" z3="-3.44498175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09353283" y3="0.02222783" z3="-1.00248412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40240772" y3="-1.1191568" z3="-2.00878089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93008707" y3="-0.99393452" z3="-1.83734458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10791099" y3="-2.44221189" z3="-1.85858946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14008351" y3="-3.60875207" z3="0.66343283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03296211" y3="-5.26662876" z3="-4.74746238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25749805" y3="-5.00565375" z3="-3.70975587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84572791" y3="-4.30540211" z3="-1.09073248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77194775" y3="-4.60341284" z3="-2.86024858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57360889" y3="-5.08474515" z3="-3.24930308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86850815" y3="-4.72932409" z3="-1.93557555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48964355" y3="-4.26827933" z3="-1.53448684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80451072" y3="-4.53055415" z3="-3.20887377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3746901" y3="-5.39612172" z3="-3.92228747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90416198" y3="-4.76068593" z3="-1.5904459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03024529" y3="-3.85188094" z3="0.22899454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16829645" y3="-3.63479174" z3="0.87675613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05783972" y3="-4.09706083" z3="0.44646903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15936573" y3="-3.49787412" z3="2.34369258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2102941" y3="-3.31095203" z3="5.1417507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35538397" y3="-3.69459143" z3="3.04953634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9883294" y3="-3.21457375" z3="3.0631618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01147613" y3="-3.12120549" z3="4.45174956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37978117" y3="-3.60359927" z3="4.43849526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27277056" y3="-3.92948648" z3="2.50324016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02851026" y3="-3.08907513" z3="2.55685427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08039414" y3="-2.92046947" z3="4.98903166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31729481" y3="-3.76926951" z3="4.97551339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22724477" y3="-3.24660534" z3="6.23337306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41383907" y3="-3.90831019" z3="-0.63298384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1750462" y3="-3.41042146" z3="-1.08765442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51880792" y3="0.22760253" z3="-4.71558907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07627711" y3="-1.70886405" z3="0.02027524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89274559" y3="-0.95410822" z3="1.17812503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82827739" y3="-0.30404629" z3="1.50240607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3495133" y3="0.56184208" z3="1.20440696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41563742" y3="1.45055797" z3="-0.42835047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99563849" y3="-0.69911072" z3="1.39725644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33726017" y3="1.76529878" z3="2.63995965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86238955" y3="-0.93906804" z3="2.081399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62437497" y3="-0.32322218" z3="3.33739081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19167363" y3="0.75081741" z3="-1.25183271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37281195" y3="2.22599877" z3="-0.43139396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38690344" y3="1.95086958" z3="-0.58942356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01561758" y3="-1.06185552" z3="2.43821616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97148048" y3="-0.24062969" z3="1.16464471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87190153" y3="-1.5415979" z3="0.69735794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39899036" y3="1.23410076" z3="3.60615707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60133391" y3="2.34887639" z3="2.63668484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17611331" y3="2.48125668" z3="2.58139508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76061751" y3="-0.78110898" z3="3.84570012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53611799" y3="-0.49342228" z3="3.92501769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45154253" y3="0.75818014" z3="3.2137874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83713697" y3="-0.7203507" z3="0.99461554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40624645" y3="-2.04542079" z3="0.85165882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75818408" y3="-2.69470994" z3="1.89499974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55750485" y3="-2.00610043" z3="3.08746847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04185164" y3="-0.71657029" z3="3.28702492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68981681" y3="-0.08068164" z3="2.23277949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50459918" y3="-2.53923682" z3="-0.11671012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35865707" y3="-3.70177222" z3="1.76901243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70052636" y3="-2.60828439" z3="4.11369744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86697765" y3="-0.21082124" z3="4.23724062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03721547" y3="0.94952412" z3="2.35196337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80001299" y3="0.44707492" z3="-4.29570591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77900888" y3="-0.52035706" z3="-4.47985885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42839168" y3="-1.71113578" z3="-5.10567136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13987838" y3="-1.94117217" z3="-5.57740208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83188929" y3="-0.97047263" z3="-5.37241537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04713929" y3="1.36957909" z3="-3.76411992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79937898" y3="-0.37501521" z3="-4.12427388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44019071" y3="-2.75968593" z3="-5.25192116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09262538" y3="-2.88072087" z3="-6.07911099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85491062" y3="-1.15564729" z3="-5.70372624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38013687" y3="-1.91820564" z3="5.06195633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31897155" y3="-3.74724151" z3="3.94157166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21228177" y3="-3.66313146" z3="-6.02726299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44725347" y3="-2.67189425" z3="-4.57760101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05980156" y3="1.17327406" z3="-1.47479357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09972437" y3="1.55769839" z3="-2.45559336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42624563" y3="1.51371859" z3="-1.66611022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83491207" y3="2.18548664" z3="-2.7915223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.152015" y3="1.22037891" z3="-0.90117005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89074543" y3="2.44192688" z3="-2.92921819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55886133" y3="2.23481324" z3="-3.61933336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88829525" y3="2.53906492" z3="-3.78278526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83857909" y3="2.50474469" z3="-4.3950346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21913186" y3="3.05644999" z3="-4.68881991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38443245" y3="3.14239139" z3="-3.31730501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26983862" y3="3.55213479" z3="-4.10690696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18402736" y3="4.15511088" z3="-2.71569633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92648827" y3="5.48791928" z3="-2.93391236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01131499" y3="3.86819756" z3="-2.06474957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55761159" y3="6.24436288" z3="-2.4597107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03883279" y3="4.93748098" z3="-4.32801582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85162548" y3="5.88871333" z3="-3.76234071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18835005" y3="5.23304356" z3="-4.95014508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66197677" y3="6.95205653" z3="-3.93548152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47781938" y3="-2.18305597" z3="-0.28962023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45495433" y3="-2.97826241" z3="-1.05396848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00299824" y3="-2.56053553" z3="0.60241157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09217639" y3="-1.36273624" z3="-0.70697078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17833107" y3="-1.41710274" z3="-1.15567729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31429049" y3="-0.37679181" z3="-1.5043349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10125011" y3="-1.54476471" z3="-0.95650471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42671145" y3="-2.07217721" z3="-2.00491112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3331,.0414,-.1863;7.3759,.1747,.431;6.6372,.4449,-.3298;4.7187,1.2299,-2.2534;4.3814,.4209,-1.1804;2.7238,.8335,-3.6598;3.6225,1.739,-3.126;1.3698,2.5763,-4.6087;1.5555,1.2347,-4.3732;.4906,2.9095,-5.169;2.9267,-.4968,-3.445;3.0935,.0222,-1.0025;2.4024,-1.1192,-2.0088;.9301,-.9939,-1.8373;3.1079,-2.4422,-1.8586;-.1401,-3.6088,.6634;-.033,-5.2666,-4.7475;-.2575,-5.0057,-3.7098;-.8457,-4.3054,-1.0907;.7719,-4.6034,-2.8602;-1.5736,-5.0847,-3.2493;-1.8685,-4.7293,-1.9356;.4896,-4.2683,-1.5345;1.8045,-4.5306,-3.2089;-2.3747,-5.3961,-3.9223;-2.9042,-4.7607,-1.5904;-1.0302,-3.8519,.229;-2.1683,-3.6348,.8768;-3.0578,-4.0971,.4465;-2.1594,-3.4979,2.3437;-2.2103,-3.311,5.1418;-3.3554,-3.6946,3.0495;-.9883,-3.2146,3.0632;-1.0115,-3.1212,4.4517;-3.3798,-3.6036,4.4385;-4.2728,-3.9295,2.5032;-.0285,-3.0891,2.5569;-.0804,-2.9205,4.989;-4.3173,-3.7693,4.9755;-2.2272,-3.2466,6.2334;1.4138,-3.9083,-.633;2.175,-3.4104,-1.0877;.5188,.2276,-4.7156;-3.0763,-1.7089,.0203;-2.8927,-.9541,1.1781;-1.8283,-.304,1.5024;-.3495,.5618,1.2044;-.4156,1.4506,-.4284;.9956,-.6991,1.3973;-.3373,1.7653,2.64;-3.8624,-.9391,2.0814;-3.6244,-.3232,3.3374;-.1917,.7508,-1.2518;.3728,2.226,-.4314;-1.3869,1.9509,-.5894;1.0156,-1.0619,2.4382;1.9715,-.2406,1.1646;.8719,-1.5416,.6974;-.399,1.2341,3.6062;.6013,2.3489,2.6367;-1.1761,2.4813,2.5814;-2.7606,-.7811,3.8457;-4.5361,-.4934,3.925;-3.4515,.7582,3.2138;4.8371,-.7204,.9946;4.4062,-2.0454,.8517;3.7582,-2.6947,1.895;3.5575,-2.0061,3.0875;4.0419,-.7166,3.287;4.6898,-.0807,2.2328;4.5046,-2.5392,-.1167;3.3587,-3.7018,1.769;2.7005,-2.6083,4.1137;3.867,-.2108,4.2372;5.0372,.9495,2.352;-.8,.4471,-4.2957;-1.779,-.5204,-4.4799;-1.4284,-1.7111,-5.1057;-.1399,-1.9412,-5.5774;.8319,-.9705,-5.3724;-1.0471,1.3696,-3.7641;-2.7994,-.375,-4.1243;-2.4402,-2.7597,-5.2519;.0926,-2.8807,-6.0791;1.8549,-1.1556,-5.7037;2.3801,-1.9182,5.062;2.319,-3.7472,3.9416;-2.2123,-3.6631,-6.0273;-3.4473,-2.6719,-4.5776;7.0598,1.1733,-1.4748;6.0997,1.5577,-2.4556;8.4262,1.5137,-1.6661;8.8349,2.1855,-2.7915;9.152,1.2204,-.9012;9.8907,2.4419,-2.9292;6.5589,2.2348,-3.6193;7.8883,2.5391,-3.7828;5.8386,2.5047,-4.395;8.2191,3.0564,-4.6888;3.3844,3.1424,-3.3173;2.2698,3.5521,-4.1069;4.184,4.1551,-2.7157;3.9265,5.4879,-2.9339;5.0113,3.8682,-2.0647;4.5576,6.2444,-2.4597;2.0388,4.9375,-4.328;2.8516,5.8887,-3.7623;1.1884,5.233,-4.9501;2.662,6.9521,-3.9355;-4.4778,-2.1831,-.2896;-4.455,-2.9783,-1.054;-5.003,-2.5605,.6024;-5.0922,-1.3627,-.707;-2.1783,-1.4171,-1.1557;-2.3143,-.3768,-1.5043;-1.1013,-1.5448,-.9565;-2.4267,-2.0722,-2.0049;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650407836549</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003279770313 0.000346646865 0.020711520251 0.005341514083</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030657383 -0.000567538 -0.000005706 0.000177159 0.000267802 0.000317748 0.000406222 0.000443860 0.000595698 0.000810002 0.000938741 0.001057097 0.001269655 0.001344508 0.001385555 0.001424959 0.001571241 0.001820915 0.001845087 0.001961751 0.002194333 0.002410503 0.002650191 0.002682673 0.002781642 0.003019474 0.003123483 0.003477774 0.003616785 0.003915927 0.004464002 0.004709574 0.004817320 0.005082154 0.006018650 0.006087986 0.006140526 0.006601725 0.006961463 0.007764393 0.008108853 0.008232377 0.009308586 0.009539214 0.010014912 0.010661012 0.010946227 0.011090800 0.011739099 0.012235681 0.012929713 0.013127166 0.014022859 0.014567421 0.015138732 0.015498696 0.015715182 0.016264767 0.016911702 0.017474811 0.018110614 0.018363191 0.019423163 0.019576052 0.019978444 0.020806546 0.021221894 0.021438983 0.022583722 0.023141695 0.025148420 0.026082830 0.026794614 0.026992803 0.027685143 0.029475652 0.029600654 0.031497090 0.033290347 0.033566073 0.033947463 0.035783413 0.036899275 0.037669433 0.039591555 0.040051083 0.040838035 0.042340357 0.044289124 0.045171735 0.045475373 0.047031957 0.047791384 0.049226965 0.050407437 0.050940091 0.051134403 0.051304047 0.052480668 0.052647355 0.052904838 0.053112098 0.054713283 0.054910165 0.055932282 0.056256638 0.056509529 0.056660939 0.057149993 0.058731886 0.060371493 0.060882554 0.061697927 0.062217969 0.063276104 0.064470178 0.065271347 0.065918335 0.066461777 0.067920151 0.069044653 0.070253614 0.072727958 0.074483312 0.074726792 0.076252737 0.078308417 0.083723799 0.085900995 0.087094574 0.087344229 0.088354555 0.090440418 0.090969806 0.093039201 0.094604069 0.095448940 0.096410453 0.097836746 0.098636474 0.098913892 0.100009762 0.100487288 0.102435498 0.103195184 0.103414008 0.103918968 0.104368249 0.105905553 0.106918340 0.107426024 0.109708795 0.110876148 0.111896701 0.112567473 0.114903695 0.116079289 0.116460102 0.118671322 0.120409015 0.121089827 0.122946817 0.124327565 0.125395115 0.126034976 0.126311285 0.127042776 0.131979504 0.135063822 0.135781274 0.142778692 0.143638571 0.147035309 0.147576717 0.149711675 0.152570188 0.154693827 0.156191974 0.156714376 0.161504864 0.161874432 0.173569113 0.174107077 0.180005163 0.184349247 0.186181662 0.189558068 0.190340799 0.194090187 0.194635321 0.198406533 0.200181671 0.205209074 0.206900173 0.207312998 0.210207720 0.214643931 0.216573031 0.217887772 0.218873339 0.220701734 0.225244886 0.226401248 0.232141415 0.235121262 0.235486186 0.235922650 0.244584907 0.256014893 0.257249729 0.263663704 0.269869081 0.280367390 0.283025386 0.286303868 0.291631262 0.296713332 0.304360723 0.305735975 0.307287133 0.314276898 0.316693459 0.317377421 0.322180133 0.329764485 0.332837655 0.351776738 0.352159993 0.355097600 0.355764078 0.360076006 0.362820779 0.364120824 0.384449203 0.386024466 0.392065732 0.410674292 0.425666176 0.430913803 0.462310569 0.468667353 0.478305204 0.483642071 0.484297638 0.487690441 0.491413006 0.509541768 0.515373845 0.535260130 0.567780169 0.573695149 0.592337941 0.593871434 0.606432211 0.608143072 0.644670321 0.646977740 0.649433898 0.674275864 0.677820796 0.685852476 0.691893235 0.693504414 0.700077211 0.704415884 0.717383571 0.741320470 0.751242566 0.759230333 0.769603314 0.772674989 0.778805839 0.810966001 0.815318135 0.819624528 0.821644799 0.823532921 0.831613279 0.834689235 0.836152797 0.842315171 0.845745102 0.847499854 0.849698797 0.859070507 0.865892407 0.866710218 0.873979245 0.885215783 0.885735160 0.889690367 0.899547012 0.900950213 0.904068442 0.923414514 0.927434502 0.935522840 0.936930405 0.966161738 0.975958331 0.986053602 1.001153770 1.018989585 1.028114638 1.041846309 1.050864023 1.057532276 1.068815650 1.086629507 1.088697362 1.104495488 1.107008470 1.112455497 1.124248245 1.128687601 1.136007079 1.144041889 1.174746204 1.178933562 1.181152667 1.186816466 1.191398876 1.196211895 1.224618012 1.228345408 1.275071430 1.302083387 1.319553314 1.328169351 1.333220064 1.336280255 1.336298230 1.342413199 1.343125270 1.345026850 1.359148200 1.378732869 1.382951342 1.384916947 1.415613644 1.420291433 1.436532942 1.551480284 1.681627396 1.776278882</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">234</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33680935" y3="0.04260506" z3="-0.18975843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38043262" y3="0.16931467" z3="0.4248027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64142503" y3="0.44093849" z3="-0.33527809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72282578" y3="1.23096847" z3="-2.25689839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38493882" y3="0.42430089" z3="-1.18276984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72574581" y3="0.83850809" z3="-3.66029267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62709762" y3="1.74201971" z3="-3.12906653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37360116" y3="2.5819498" z3="-4.60930548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55711118" y3="1.24101714" z3="-4.37239977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49411848" y3="2.91629681" z3="-5.16833944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92672309" y3="-0.49195597" z3="-3.4449807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09634857" y3="0.02840084" z3="-1.00324911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40305815" y3="-1.11297235" z3="-2.00812201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93103885" y3="-0.98638829" z3="-1.8357022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10748719" y3="-2.43670059" z3="-1.85805328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13948921" y3="-3.61140884" z3="0.66947418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02539202" y3="-5.26507123" z3="-4.74333381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25144404" y3="-5.00477218" z3="-3.70573346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84309831" y3="-4.3062923" z3="-1.08684329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7752512" y3="-4.59763483" z3="-2.85642897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56672556" y3="-5.08932673" z3="-3.24535296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86331293" y3="-4.73449846" z3="-1.93164263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.491791" y3="-4.26376088" z3="-1.53054805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80809382" y3="-4.52188782" z3="-3.20512703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36886796" y3="-5.40047445" z3="-3.91886658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90002881" y3="-4.76713163" z3="-1.58654536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02939473" y3="-3.85426528" z3="0.23323387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1682263" y3="-3.63975554" z3="0.88009183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0569184" y3="-4.10221919" z3="0.44808591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16125931" y3="-3.50317716" z3="2.3470008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21740487" y3="-3.3141884" z3="5.14461077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35760778" y3="-3.7027875" z3="3.0513352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99275491" y3="-3.21571402" z3="3.06770218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01779856" y3="-3.12243904" z3="4.45624189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38507564" y3="-3.61002973" z3="4.43994964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27409507" y3="-3.93959467" z3="2.50385917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03318295" y3="-3.08693236" z3="2.56238469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08700163" y3="-2.92037153" z3="4.99448212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.324244" y3="-3.77529571" z3="4.97577737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23698438" y3="-3.24854171" z3="6.23596663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4157726" y3="-3.90176671" z3="-0.62886071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17597282" y3="-3.40292346" z3="-1.08393815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51939941" y3="0.23408413" z3="-4.71382124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07799147" y3="-1.71381563" z3="0.02160158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8975282" y3="-0.95974046" z3="1.1803442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83517058" y3="-0.30753538" z3="1.50696005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35749882" y3="0.56026173" z3="1.20582747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42988802" y3="1.45010954" z3="-0.42587897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98997426" y3="-0.69887588" z3="1.39516296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34333031" y3="1.76242958" z3="2.64263584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86849903" y3="-0.94721878" z3="2.0824638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63395465" y3="-0.33021072" z3="3.33834239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.198471" y3="0.75343687" z3="-1.24952712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35210043" y3="2.23279685" z3="-0.42721605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40552762" y3="1.94212568" z3="-0.58762483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0123806" y3="-1.06128122" z3="2.43653249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96555452" y3="-0.23975051" z3="1.16033004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8660048" y3="-1.54193188" z3="0.69638583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40543246" y3="1.23054681" z3="3.60857706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59608399" y3="2.34483522" z3="2.63939294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18126674" y3="2.47993374" z3="2.58515654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77097535" y3="-0.78708874" z3="3.84878278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54704151" y3="-0.50040579" z3="3.92428619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46100672" y3="0.75142463" z3="3.21440141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83935228" y3="-0.71866802" z3="0.99092444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41000805" y3="-2.04425523" z3="0.84788409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7590289" y3="-2.69311966" z3="1.88975137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55458763" y3="-2.00362529" z3="3.08144291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03660976" y3="-0.71348504" z3="3.28064986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68732512" y3="-0.07802806" z3="2.2278196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51136812" y3="-2.53873923" z3="-0.1198523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36023444" y3="-3.7005007" z3="1.7631253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69491398" y3="-2.60539692" z3="4.10570822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85776122" y3="-0.20689712" z3="4.22954585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03258698" y3="0.95260295" z3="2.34638842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79889575" y3="0.45308605" z3="-4.29180008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77764408" y3="-0.51496851" z3="-4.47186205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42794672" y3="-1.70607869" z3="-5.09710258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14040604" y3="-1.93562415" z3="-5.5728155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83142838" y3="-0.96418044" z3="-5.36988175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04542048" y3="1.3758356" z3="-3.76021941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79712076" y3="-0.3699361" z3="-4.11329414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43923167" y3="-2.75561565" z3="-5.23987546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09157242" y3="-2.87539352" z3="-6.07398409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85399821" y3="-1.14893853" z3="-5.70324873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37130753" y3="-1.9148785" z3="5.05233391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31429865" y3="-3.74462713" z3="3.93335599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21289578" y3="-3.65819367" z3="-6.01750302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44398754" y3="-2.66956477" z3="-4.56223197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06468967" y3="1.16934913" z3="-1.48038073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10445277" y3="1.55560352" z3="-2.46037982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43224931" y3="1.50959447" z3="-1.67247645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84154948" y3="2.1831944" z3="-2.79770988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15785173" y3="1.21288005" z3="-0.90895395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89599008" y3="2.42902517" z3="-2.93877176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5640231" y3="2.23261601" z3="-3.62462719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89469281" y3="2.53798671" z3="-3.78840187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8431283" y3="2.50198097" z3="-4.40012349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22543927" y3="3.04961432" z3="-4.6956877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39120068" y3="3.14582373" z3="-3.32117455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27567741" y3="3.55712543" z3="-4.10869942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19382531" y3="4.15778319" z3="-2.72242358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93884184" y3="5.49032813" z3="-2.94249927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02220803" y3="3.8698449" z3="-2.07323314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57159133" y3="6.24710226" z3="-2.46925996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04569787" y3="4.94352046" z3="-4.32950483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86218931" y3="5.89307904" z3="-3.76789189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19431699" y3="5.24006652" z3="-4.95001104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67503481" y3="6.95604466" z3="-3.94264178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47794523" y3="-2.19031394" z3="-0.29107051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45261046" y3="-2.98539019" z3="-1.05568168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00424911" y3="-2.56870277" z3="0.5999242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09259854" y3="-1.37066157" z3="-0.70932922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17843985" y3="-1.42061898" z3="-1.15260029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3139464" y3="-0.37969764" z3="-1.50056612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10122028" y3="-1.54856082" z3="-0.95167439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42306106" y3="-2.07493154" z3="-2.00212519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3368,.0426,-.1898;7.3804,.1693,.4248;6.6414,.4409,-.3353;4.7228,1.231,-2.2569;4.3849,.4243,-1.1828;2.7257,.8385,-3.6603;3.6271,1.742,-3.1291;1.3736,2.5819,-4.6093;1.5571,1.241,-4.3724;.4941,2.9163,-5.1683;2.9267,-.492,-3.445;3.0963,.0284,-1.0032;2.4031,-1.113,-2.0081;.931,-.9864,-1.8357;3.1075,-2.4367,-1.8581;-.1395,-3.6114,.6695;-.0254,-5.2651,-4.7433;-.2514,-5.0048,-3.7057;-.8431,-4.3063,-1.0868;.7753,-4.5976,-2.8564;-1.5667,-5.0893,-3.2454;-1.8633,-4.7345,-1.9316;.4918,-4.2638,-1.5305;1.8081,-4.5219,-3.2051;-2.3689,-5.4005,-3.9189;-2.9,-4.7671,-1.5865;-1.0294,-3.8543,.2332;-2.1682,-3.6398,.8801;-3.0569,-4.1022,.4481;-2.1613,-3.5032,2.347;-2.2174,-3.3142,5.1446;-3.3576,-3.7028,3.0513;-.9928,-3.2157,3.0677;-1.0178,-3.1224,4.4562;-3.3851,-3.61,4.4399;-4.2741,-3.9396,2.5039;-.0332,-3.0869,2.5624;-.087,-2.9204,4.9945;-4.3242,-3.7753,4.9758;-2.237,-3.2485,6.236;1.4158,-3.9018,-.6289;2.176,-3.4029,-1.0839;.5194,.2341,-4.7138;-3.078,-1.7138,.0216;-2.8975,-.9597,1.1803;-1.8352,-.3075,1.507;-.3575,.5603,1.2058;-.4299,1.4501,-.4259;.99,-.6989,1.3952;-.3433,1.7624,2.6426;-3.8685,-.9472,2.0825;-3.634,-.3302,3.3383;-.1985,.7534,-1.2495;.3521,2.2328,-.4272;-1.4055,1.9421,-.5876;1.0124,-1.0613,2.4365;1.9656,-.2398,1.1603;.866,-1.5419,.6964;-.4054,1.2305,3.6086;.5961,2.3448,2.6394;-1.1813,2.4799,2.5852;-2.771,-.7871,3.8488;-4.547,-.5004,3.9243;-3.461,.7514,3.2144;4.8394,-.7187,.9909;4.41,-2.0443,.8479;3.759,-2.6931,1.8898;3.5546,-2.0036,3.0814;4.0366,-.7135,3.2806;4.6873,-.078,2.2278;4.5114,-2.5387,-.1199;3.3602,-3.7005,1.7631;2.6949,-2.6054,4.1057;3.8578,-.2069,4.2295;5.0326,.9526,2.3464;-.7989,.4531,-4.2918;-1.7776,-.515,-4.4719;-1.4279,-1.7061,-5.0971;-.1404,-1.9356,-5.5728;.8314,-.9642,-5.3699;-1.0454,1.3758,-3.7602;-2.7971,-.3699,-4.1133;-2.4392,-2.7556,-5.2399;.0916,-2.8754,-6.074;1.854,-1.1489,-5.7032;2.3713,-1.9149,5.0523;2.3143,-3.7446,3.9334;-2.2129,-3.6582,-6.0175;-3.444,-2.6696,-4.5622;7.0647,1.1693,-1.4804;6.1045,1.5556,-2.4604;8.4322,1.5096,-1.6725;8.8415,2.1832,-2.7977;9.1579,1.2129,-.909;9.896,2.429,-2.9388;6.564,2.2326,-3.6246;7.8947,2.538,-3.7884;5.8431,2.502,-4.4001;8.2254,3.0496,-4.6957;3.3912,3.1458,-3.3212;2.2757,3.5571,-4.1087;4.1938,4.1578,-2.7224;3.9388,5.4903,-2.9425;5.0222,3.8698,-2.0732;4.5716,6.2471,-2.4693;2.0457,4.9435,-4.3295;2.8622,5.8931,-3.7679;1.1943,5.2401,-4.95;2.675,6.956,-3.9426;-4.4779,-2.1903,-.2911;-4.4526,-2.9854,-1.0557;-5.0042,-2.5687,.5999;-5.0926,-1.3707,-.7093;-2.1784,-1.4206,-1.1526;-2.3139,-.3797,-1.5006;-1.1012,-1.5486,-.9517;-2.4231,-2.0749,-2.0021;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414465996</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003534790788 0.000343540092 0.021847467227 0.005339809852</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030665129 -0.001648082 -0.000469854 0.000055633 0.000198490 0.000319824 0.000376981 0.000454325 0.000586283 0.000803396 0.000934673 0.001060647 0.001232106 0.001344080 0.001380605 0.001433408 0.001566608 0.001811714 0.001836228 0.001941840 0.002219239 0.002401721 0.002638363 0.002680003 0.002719177 0.003028703 0.003118647 0.003478453 0.003545389 0.003909219 0.004463421 0.004716919 0.004800220 0.005078744 0.006008321 0.006119731 0.006143802 0.006630928 0.006959520 0.007755705 0.008109524 0.008244194 0.009312712 0.009515825 0.010008255 0.010659245 0.010965117 0.011080361 0.011761847 0.012249960 0.012929754 0.013128999 0.014033657 0.014567856 0.015134276 0.015500532 0.015719796 0.016262892 0.016934519 0.017474721 0.018112932 0.018421066 0.019425288 0.019570584 0.020011447 0.020804465 0.021221689 0.021435492 0.022593685 0.023153245 0.025046076 0.026169897 0.026796598 0.026991512 0.027691802 0.029484655 0.029629887 0.031492519 0.033292960 0.033572763 0.033955269 0.035792605 0.036899218 0.037676768 0.039587814 0.040057109 0.040849734 0.042332498 0.044266803 0.045212821 0.045443591 0.047056945 0.047805442 0.049230334 0.050398506 0.050963698 0.051156853 0.051357647 0.052481719 0.052650620 0.052909057 0.053111951 0.054712142 0.054929467 0.055948479 0.056262357 0.056511660 0.056670783 0.057176098 0.058867046 0.060381157 0.060896115 0.061699641 0.062254341 0.063279493 0.064499213 0.065309859 0.065920653 0.066489447 0.067981142 0.069044731 0.070254657 0.072730100 0.074495751 0.074753771 0.076273502 0.078332642 0.083806927 0.086176314 0.087096601 0.087415617 0.088510048 0.090440346 0.090982879 0.093101281 0.094604233 0.095449889 0.096412647 0.097843233 0.098766299 0.098987610 0.100073268 0.100609617 0.102438321 0.103191393 0.103420574 0.103984401 0.104384378 0.106053069 0.106927529 0.107439767 0.109710611 0.110884563 0.111918193 0.112607561 0.114915687 0.116144245 0.116560276 0.118676169 0.120620185 0.121163558 0.122960537 0.124352840 0.125436622 0.126067665 0.126344844 0.127077127 0.131991826 0.135071908 0.135784083 0.142785326 0.143651798 0.147035521 0.147581878 0.149714424 0.152574921 0.154685365 0.156234712 0.156733674 0.161519492 0.161876910 0.173576605 0.174108888 0.180019404 0.184405059 0.186188318 0.189571736 0.190356031 0.194097203 0.194708559 0.198425120 0.200200806 0.205214011 0.206898860 0.207324587 0.210212175 0.214779707 0.216572782 0.217888139 0.218917211 0.220703052 0.225251300 0.226453035 0.232145894 0.235119996 0.235499686 0.235925830 0.244601359 0.256016015 0.257253576 0.263678949 0.269876544 0.280367887 0.283077806 0.286306791 0.291639070 0.296714132 0.304361650 0.305747546 0.307289858 0.314294187 0.316696251 0.317378810 0.322196852 0.329775495 0.332846447 0.351782942 0.352158050 0.355092116 0.355759635 0.360094520 0.362821573 0.364133462 0.384458738 0.386027769 0.392120595 0.410665894 0.425700725 0.430914778 0.462338994 0.468674970 0.478326849 0.483652651 0.484313246 0.487868272 0.491418757 0.509558773 0.515387208 0.535274189 0.568141806 0.574122911 0.592419654 0.593928798 0.606447061 0.608159100 0.644670498 0.647031506 0.649457296 0.674279919 0.677866887 0.685883186 0.691901996 0.693523346 0.700068905 0.704416209 0.717471601 0.741348693 0.751244854 0.759276340 0.769654980 0.772710237 0.778807250 0.810970173 0.815337749 0.819646441 0.821667726 0.823534216 0.831614076 0.834798799 0.836219524 0.842402736 0.845791571 0.847508674 0.849720928 0.859115286 0.865892876 0.866719612 0.874013649 0.885295657 0.885792168 0.889692619 0.899619383 0.900977118 0.904075733 0.923421061 0.927473956 0.935608672 0.937054793 0.966164663 0.975994489 0.986067485 1.001155724 1.019082401 1.028211424 1.041882755 1.050870837 1.057543216 1.068818275 1.086630429 1.088705776 1.104515936 1.107061599 1.112468989 1.124537838 1.130470768 1.136024508 1.144164307 1.174787423 1.178964573 1.181158425 1.186858572 1.191407386 1.196213489 1.224638325 1.228344519 1.275073429 1.302140622 1.319607998 1.328234022 1.333287821 1.336295230 1.336347149 1.342725446 1.343142312 1.345047973 1.359165270 1.378735438 1.382969466 1.384940354 1.415608924 1.420325638 1.436588712 1.551483362 1.681630544 1.776295265</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">235</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33554673" y3="0.0456391" z3="-0.18859316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37860161" y3="0.17362669" z3="0.42892593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64080773" y3="0.44560623" z3="-0.33205365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72471906" y3="1.23287061" z3="-2.25752133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38499519" y3="0.42688326" z3="-1.18301236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72701647" y3="0.84047816" z3="-3.66125773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63006327" y3="1.74374219" z3="-3.13112097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37829268" y3="2.58590671" z3="-4.61314978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5589053" y3="1.24452228" z3="-4.37328004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49961415" y3="2.92095605" z3="-5.1730114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92553022" y3="-0.49013352" z3="-3.4448229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09596799" y3="0.03235061" z3="-1.00389927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40225124" y3="-1.10988754" z3="-2.00724346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93028894" y3="-0.98355124" z3="-1.83377851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10713884" y3="-2.43323403" z3="-1.85668476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13848016" y3="-3.609326" z3="0.66768485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02428232" y3="-5.26386019" z3="-4.74483946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25019307" y3="-5.00349338" z3="-3.70723037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84075632" y3="-4.30687908" z3="-1.08783878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77801076" y3="-4.59817182" z3="-2.85743976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56597091" y3="-5.08718935" z3="-3.24705609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86211141" y3="-4.73334268" z3="-1.93318993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49440551" y3="-4.26439993" z3="-1.53153462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81062949" y3="-4.52247507" z3="-3.2061347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36608198" y3="-5.40039738" z3="-3.92033645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89786941" y3="-4.76746675" z3="-1.58843723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02734503" y3="-3.85548336" z3="0.23243406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16676158" y3="-3.64394549" z3="0.87979836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05396591" y3="-4.10938557" z3="0.44835578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16014349" y3="-3.50769173" z3="2.34671442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2165105" y3="-3.31863412" z3="5.14446432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35634371" y3="-3.71057033" z3="3.05101235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99174898" y3="-3.21731127" z3="3.0675148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01775589" y3="-3.12278435" z3="4.45596716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38355" y3="-3.61833008" z3="4.43979184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27163177" y3="-3.95119113" z3="2.50361488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0318504" y3="-3.08682236" z3="2.56221648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08866568" y3="-2.91610904" z3="4.99411629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32081269" y3="-3.78911676" z3="4.97544557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23598155" y3="-3.25257022" z3="6.2359285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4169409" y3="-3.9010971" z3="-0.62993718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17663633" y3="-3.40100776" z3="-1.08476099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51876353" y3="0.23932774" z3="-4.71106282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08154926" y3="-1.72022547" z3="0.02495088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90052319" y3="-0.96617852" z3="1.18377173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83758043" y3="-0.31379205" z3="1.50894696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36364765" y3="0.5594838" z3="1.20646059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44128074" y3="1.44815971" z3="-0.42596596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98761218" y3="-0.69601886" z3="1.39502144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35250411" y3="1.76285677" z3="2.64204477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87023955" y3="-0.95475411" z3="2.08713178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6344115" y3="-0.33834236" z3="3.34317144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20399849" y3="0.75189024" z3="-1.2487392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33316462" y3="2.23779526" z3="-0.42740694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42116187" y3="1.93085217" z3="-0.58906603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01167211" y3="-1.05870889" z3="2.43594786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96097089" y3="-0.2335752" z3="1.15997431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8652047" y3="-1.53878814" z3="0.69514543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41570818" y3="1.23182646" z3="3.60836067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58631084" y3="2.34586548" z3="2.63973562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19077615" y3="2.47939186" z3="2.58243872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77046037" y3="-0.79493998" z3="3.85219461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54647658" y3="-0.50978502" z3="3.92995023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46273701" y3="0.7434022" z3="3.21952553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83690573" y3="-0.71549266" z3="0.99167362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40914336" y3="-2.04138524" z3="0.84829014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75830819" y3="-2.69115564" z3="1.88967959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55276068" y3="-2.00227751" z3="3.08141049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03389932" y3="-0.71173727" z3="3.28164386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68386642" y3="-0.07522983" z3="2.22887959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51232225" y3="-2.53569205" z3="-0.11915619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36078087" y3="-3.69890785" z3="1.76258166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69402004" y3="-2.60551807" z3="4.10560748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85517942" y3="-0.20596166" z3="4.23143023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02859973" y3="0.9557047" z3="2.34847811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79744643" y3="0.45999236" z3="-4.28454522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77790661" y3="-0.50738614" z3="-4.46412218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43116475" y3="-1.69835943" z3="-5.09078585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14560961" y3="-1.92911201" z3="-5.57000519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82762563" y3="-0.9589108" z3="-5.37079543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04123823" y3="1.38271448" z3="-3.75193169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79597413" y3="-0.36138642" z3="-4.10265607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44384382" y3="-2.74682106" z3="-5.23079458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08357603" y3="-2.86872015" z3="-6.07294251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84878522" y3="-1.14441783" z3="-5.7073878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36994329" y3="-1.91569205" z3="5.05284845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31462273" y3="-3.74512049" z3="3.93270416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22192008" y3="-3.64848729" z3="-6.01006027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4454551" y3="-2.66142907" z3="-4.54786452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06560489" y3="1.17152945" z3="-1.47782191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10700472" y3="1.55643819" z3="-2.45985664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43281146" y3="1.5081249" z3="-1.66915774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84364413" y3="2.17582872" z3="-2.7959747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15763657" y3="1.21521593" z3="-0.90309142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90061802" y3="2.43084876" z3="-2.93338377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56859637" y3="2.22933826" z3="-3.62509598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89856823" y3="2.52912785" z3="-3.78876262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84955952" y3="2.49885692" z3="-4.40204255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2312573" y3="3.04364237" z3="-4.69597616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39777457" y3="3.14754064" z3="-3.32737142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28399364" y3="3.5592352" z3="-4.11715794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20289465" y3="4.15945663" z3="-2.73111308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95277993" y3="5.49227301" z3="-2.95641237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02945613" y3="3.87156481" z3="-2.07973172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58868792" y3="6.24785373" z3="-2.4869442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05998571" y3="4.94462203" z3="-4.34473066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87895781" y3="5.89457124" z3="-3.78540784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20974858" y3="5.24191913" z3="-4.96639126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69541933" y3="6.95782746" z3="-3.96448924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48169213" y3="-2.19817284" z3="-0.285763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45658107" y3="-2.99344302" z3="-1.05011137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00640049" y3="-2.5767937" z3="0.60620222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09757347" y3="-1.37923576" z3="-0.703503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18389633" y3="-1.42428113" z3="-1.15031063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32089608" y3="-0.38293194" z3="-1.49556431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10698307" y3="-1.55113188" z3="-0.95113129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43228714" y3="-2.07683581" z3="-2.00147689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3355,.0456,-.1886;7.3786,.1736,.4289;6.6408,.4456,-.3321;4.7247,1.2329,-2.2575;4.385,.4269,-1.183;2.727,.8405,-3.6613;3.6301,1.7437,-3.1311;1.3783,2.5859,-4.6131;1.5589,1.2445,-4.3733;.4996,2.921,-5.173;2.9255,-.4901,-3.4448;3.096,.0324,-1.0039;2.4023,-1.1099,-2.0072;.9303,-.9836,-1.8338;3.1071,-2.4332,-1.8567;-.1385,-3.6093,.6677;-.0243,-5.2639,-4.7448;-.2502,-5.0035,-3.7072;-.8408,-4.3069,-1.0878;.778,-4.5982,-2.8574;-1.566,-5.0872,-3.2471;-1.8621,-4.7333,-1.9332;.4944,-4.2644,-1.5315;1.8106,-4.5225,-3.2061;-2.3661,-5.4004,-3.9203;-2.8979,-4.7675,-1.5884;-1.0273,-3.8555,.2324;-2.1668,-3.6439,.8798;-3.054,-4.1094,.4484;-2.1601,-3.5077,2.3467;-2.2165,-3.3186,5.1445;-3.3563,-3.7106,3.051;-.9917,-3.2173,3.0675;-1.0178,-3.1228,4.456;-3.3836,-3.6183,4.4398;-4.2716,-3.9512,2.5036;-.0319,-3.0868,2.5622;-.0887,-2.9161,4.9941;-4.3208,-3.7891,4.9754;-2.236,-3.2526,6.2359;1.4169,-3.9011,-.6299;2.1766,-3.401,-1.0848;.5188,.2393,-4.7111;-3.0815,-1.7202,.025;-2.9005,-.9662,1.1838;-1.8376,-.3138,1.5089;-.3636,.5595,1.2065;-.4413,1.4482,-.426;.9876,-.696,1.395;-.3525,1.7629,2.642;-3.8702,-.9548,2.0871;-3.6344,-.3383,3.3432;-.204,.7519,-1.2487;.3332,2.2378,-.4274;-1.4212,1.9309,-.5891;1.0117,-1.0587,2.4359;1.961,-.2336,1.16;.8652,-1.5388,.6951;-.4157,1.2318,3.6084;.5863,2.3459,2.6397;-1.1908,2.4794,2.5824;-2.7705,-.7949,3.8522;-4.5465,-.5098,3.93;-3.4627,.7434,3.2195;4.8369,-.7155,.9917;4.4091,-2.0414,.8483;3.7583,-2.6912,1.8897;3.5528,-2.0023,3.0814;4.0339,-.7117,3.2816;4.6839,-.0752,2.2289;4.5123,-2.5357,-.1192;3.3608,-3.6989,1.7626;2.694,-2.6055,4.1056;3.8552,-.206,4.2314;5.0286,.9557,2.3485;-.7974,.46,-4.2845;-1.7779,-.5074,-4.4641;-1.4312,-1.6984,-5.0908;-.1456,-1.9291,-5.57;.8276,-.9589,-5.3708;-1.0412,1.3827,-3.7519;-2.796,-.3614,-4.1027;-2.4438,-2.7468,-5.2308;.0836,-2.8687,-6.0729;1.8488,-1.1444,-5.7074;2.3699,-1.9157,5.0528;2.3146,-3.7451,3.9327;-2.2219,-3.6485,-6.0101;-3.4455,-2.6614,-4.5479;7.0656,1.1715,-1.4778;6.107,1.5564,-2.4599;8.4328,1.5081,-1.6692;8.8436,2.1758,-2.796;9.1576,1.2152,-.9031;9.9006,2.4308,-2.9334;6.5686,2.2293,-3.6251;7.8986,2.5291,-3.7888;5.8496,2.4989,-4.402;8.2313,3.0436,-4.696;3.3978,3.1475,-3.3274;2.284,3.5592,-4.1172;4.2029,4.1595,-2.7311;3.9528,5.4923,-2.9564;5.0295,3.8716,-2.0797;4.5887,6.2479,-2.4869;2.06,4.9446,-4.3447;2.879,5.8946,-3.7854;1.2097,5.2419,-4.9664;2.6954,6.9578,-3.9645;-4.4817,-2.1982,-.2858;-4.4566,-2.9934,-1.0501;-5.0064,-2.5768,.6062;-5.0976,-1.3792,-.7035;-2.1839,-1.4243,-1.1503;-2.3209,-.3829,-1.4956;-1.107,-1.5511,-.9511;-2.4323,-2.0768,-2.0015;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650405978420</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004939704635 0.000449721520 0.017289520465 0.005331828399</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030674299 -0.001203186 -0.000019472 0.000062549 0.000148783 0.000325863 0.000373611 0.000460126 0.000588842 0.000807711 0.000935480 0.001060116 0.001248890 0.001343947 0.001381120 0.001421947 0.001563341 0.001818768 0.001836057 0.001953992 0.002214145 0.002408162 0.002636442 0.002680272 0.002713842 0.003018699 0.003122379 0.003478801 0.003539849 0.003908815 0.004457877 0.004718138 0.004791416 0.005084697 0.006011090 0.006117313 0.006144265 0.006632113 0.006962169 0.007754837 0.008107230 0.008240590 0.009308004 0.009513309 0.010008225 0.010651146 0.010965099 0.011080743 0.011767521 0.012249962 0.012927182 0.013131597 0.014040260 0.014570842 0.015145908 0.015502109 0.015719997 0.016264336 0.016931340 0.017473159 0.018116257 0.018459125 0.019424812 0.019571716 0.020023125 0.020804342 0.021222548 0.021436782 0.022595585 0.023154368 0.025046351 0.026198689 0.026796619 0.026998965 0.027697968 0.029485896 0.029644584 0.031496427 0.033293594 0.033576526 0.033955757 0.035792205 0.036899685 0.037681531 0.039589685 0.040057259 0.040850498 0.042335326 0.044266156 0.045209816 0.045446593 0.047067689 0.047812222 0.049232362 0.050409933 0.050977098 0.051167083 0.051379702 0.052482130 0.052650700 0.052911928 0.053112415 0.054712597 0.054930302 0.055958645 0.056265310 0.056512991 0.056672875 0.057184681 0.058934687 0.060395404 0.060897299 0.061700031 0.062274252 0.063286056 0.064505532 0.065329107 0.065921209 0.066510395 0.068049203 0.069048075 0.070254527 0.072730509 0.074495723 0.074767080 0.076290719 0.078352226 0.083861545 0.086303166 0.087097595 0.087447319 0.088622779 0.090445095 0.090995631 0.093149432 0.094604452 0.095451081 0.096413790 0.097844770 0.098795820 0.099048695 0.100112162 0.100696619 0.102441878 0.103191797 0.103426253 0.104023988 0.104386344 0.106172443 0.106936346 0.107474390 0.109713534 0.110891258 0.111947065 0.112641085 0.114925899 0.116158529 0.116615389 0.118682338 0.120673864 0.121281056 0.122975307 0.124370499 0.125467344 0.126110085 0.126375634 0.127082573 0.131995556 0.135077689 0.135785925 0.142785577 0.143668302 0.147036449 0.147582577 0.149714656 0.152622327 0.154686815 0.156243302 0.156743543 0.161520833 0.161878644 0.173577088 0.174110438 0.180019901 0.184440882 0.186190650 0.189587363 0.190364069 0.194100262 0.194724335 0.198441759 0.200206597 0.205219597 0.206899299 0.207325485 0.210212696 0.214930145 0.216573056 0.217890120 0.218949223 0.220707925 0.225259963 0.226484232 0.232146365 0.235120174 0.235519367 0.235928950 0.244608662 0.256017036 0.257253933 0.263686220 0.269881907 0.280368358 0.283119661 0.286308894 0.291649925 0.296715755 0.304362455 0.305758720 0.307293848 0.314298685 0.316704480 0.317378806 0.322209273 0.329811360 0.332851869 0.351783215 0.352159124 0.355094187 0.355763468 0.360097127 0.362822818 0.364144882 0.384460514 0.386029055 0.392161969 0.410675552 0.425712539 0.430926617 0.462352534 0.468687755 0.478351076 0.483659236 0.484353148 0.487921716 0.491429559 0.509570481 0.515409556 0.535291772 0.568494454 0.574408656 0.592459414 0.593960930 0.606455658 0.608171556 0.644685467 0.647064092 0.649476621 0.674293544 0.677932359 0.685891468 0.691910357 0.693527179 0.700077567 0.704416393 0.717588400 0.741372355 0.751249339 0.759311895 0.769680860 0.772770091 0.778810342 0.810978757 0.815348298 0.819664009 0.821694968 0.823537438 0.831615223 0.834847666 0.836277759 0.842425135 0.845812060 0.847525234 0.849753613 0.859149419 0.865893964 0.866733704 0.874053580 0.885312595 0.885892966 0.889695485 0.899751086 0.901007464 0.904085675 0.923428776 0.927554645 0.935699459 0.937141547 0.966171822 0.976038387 0.986076361 1.001158522 1.019111733 1.028278762 1.041906237 1.050880518 1.057559851 1.068819603 1.086632758 1.088718088 1.104529371 1.107089501 1.112479689 1.124712503 1.132297670 1.136045833 1.144283143 1.174824838 1.178992891 1.181166576 1.186886519 1.191423554 1.196217821 1.224651326 1.228344710 1.275090353 1.302249028 1.319672548 1.328259996 1.333294688 1.336298577 1.336401287 1.342793639 1.343148412 1.345049861 1.359178486 1.378740800 1.382969926 1.384975291 1.415773380 1.420338238 1.436728987 1.551485954 1.681632372 1.776320872</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">236</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33222572" y3="0.04645413" z3="-0.18676133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37279177" y3="0.17909056" z3="0.43742712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63658933" y3="0.44767949" z3="-0.3266092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72493289" y3="1.23176496" z3="-2.25786883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38352363" y3="0.42623433" z3="-1.18367827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72826058" y3="0.84214446" z3="-3.6637709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63233686" y3="1.74389335" z3="-3.13345598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38447183" y3="2.58808634" z3="-4.62064875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5615178" y3="1.24728612" z3="-4.37773468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50665143" y3="2.92408471" z3="-5.18137474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92506305" y3="-0.48885012" z3="-3.44791261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.094404" y3="0.03099001" z3="-1.00660197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40091714" y3="-1.11030826" z3="-2.01144494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92888595" y3="-0.98425824" z3="-1.83819438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10525945" y3="-2.43422898" z3="-1.86221972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13646063" y3="-3.61150693" z3="0.66847228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02792141" y3="-5.26496531" z3="-4.7444936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2525399" y3="-5.005471" z3="-3.70652411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84131383" y3="-4.30827287" z3="-1.08677181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77513646" y3="-4.59900988" z3="-2.85799455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56746891" y3="-5.08972812" z3="-3.2449463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86243719" y3="-4.73582858" z3="-1.93085256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49307136" y3="-4.26538073" z3="-1.53183604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8074026" y3="-4.52294218" z3="-3.20738134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37037838" y3="-5.40013602" z3="-3.91784505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89854979" y3="-4.7686247" z3="-1.58500005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02652625" y3="-3.85674273" z3="0.23365277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16494745" y3="-3.64732942" z3="0.88267711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05269582" y3="-4.11317807" z3="0.45189185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15668057" y3="-3.50980457" z3="2.34929945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20954287" y3="-3.31939689" z3="5.14689322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35078895" y3="-3.71604834" z3="3.05529109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98881522" y3="-3.2148085" z3="3.06818889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01221345" y3="-3.12083652" z3="4.45681303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37649385" y3="-3.62273687" z3="4.44398358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26668238" y3="-3.95864547" z3="2.50899769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03118618" y3="-3.08016129" z3="2.56123283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08187629" y3="-2.91309494" z3="4.9940015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31392247" y3="-3.79321177" z3="4.98123462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22738932" y3="-3.2533374" z3="6.23837141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41798483" y3="-3.90265662" z3="-0.63140412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17650362" y3="-3.40217747" z3="-1.08771491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51897029" y3="0.24363117" z3="-4.7140347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08468438" y3="-1.72386914" z3="0.0270009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90167617" y3="-0.96964088" z3="1.18504903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83862821" y3="-0.31653908" z3="1.50813219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36759539" y3="0.56028061" z3="1.20232016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44847596" y3="1.44461138" z3="-0.43223876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98729135" y3="-0.69062499" z3="1.39262476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35890678" y3="1.76764162" z3="2.63469093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86965169" y3="-0.95854888" z3="2.09032378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63170958" y3="-0.34080974" z3="3.34525452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20687459" y3="0.74710275" z3="-1.2524084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32202118" y3="2.2383708" z3="-0.43545744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43082348" y3="1.92201419" z3="-0.59741061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01198513" y3="-1.05203288" z3="2.43406406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96083375" y3="-0.22750787" z3="1.15696894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86726122" y3="-1.53493365" z3="0.69465347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42244235" y3="1.23973211" z3="3.60262399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57966427" y3="2.35144025" z3="2.6311326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1977442" y3="2.48354536" z3="2.57197132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76641731" y3="-0.79645568" z3="3.85297571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54258724" y3="-0.51198011" z3="3.93425077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46080024" y3="0.74102579" z3="3.2204401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83315647" y3="-0.71697415" z3="0.99180319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40333243" y3="-2.04214038" z3="0.84470683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75336937" y3="-2.69440143" z3="1.88501507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55003714" y3="-2.00869513" z3="3.07892897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03241492" y3="-0.71912614" z3="3.28206572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68226702" y3="-0.08015286" z3="2.23089249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50416627" y3="-2.53375593" z3="-0.12476249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35501306" y3="-3.70157699" z3="1.75567602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69288833" y3="-2.61449021" z3="4.10283915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85448038" y3="-0.21570139" z3="4.23265419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02819839" y3="0.95004083" z3="2.35290214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79625297" y3="0.46540506" z3="-4.28377995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77800943" y3="-0.50048053" z3="-4.45689542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43474288" y3="-1.69227712" z3="-5.08501625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15085757" y3="-1.92411521" z3="-5.56904523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82422031" y3="-0.954697" z3="-5.37166912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03745564" y3="1.38858189" z3="-3.75054565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79521111" y3="-0.35370199" z3="-4.09254433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44882922" y3="-2.7401546" z3="-5.22128487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07608194" y3="-2.86397891" z3="-6.07232112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8441473" y3="-1.14098691" z3="-5.71226549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37194426" y3="-1.92758916" z3="5.05316534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31198433" y3="-3.7530397" z3="3.92719544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23089158" y3="-3.6414619" z3="-6.00258406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44726352" y3="-2.65411132" z3="-4.53453887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06361672" y3="1.17469248" z3="-1.47095787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10732193" y3="1.55598457" z3="-2.45676298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43141613" y3="1.51826389" z3="-1.65640284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84524258" y3="2.18998387" z3="-2.78129096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15337672" y3="1.22584183" z3="-0.88781958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89945687" y3="2.43737489" z3="-2.91739504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57176062" y3="2.22941626" z3="-3.62114248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90283968" y3="2.53833165" z3="-3.77856757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85454236" y3="2.49472712" z3="-4.401428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23719765" y3="3.04742591" z3="-4.68591245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40300392" y3="3.14811375" z3="-3.33204097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29154529" y3="3.56111524" z3="-4.12446501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20941136" y3="4.15916813" z3="-2.73718976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9631528" y3="5.49197612" z3="-2.96688273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03371596" y3="3.87100892" z3="-2.08304799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5995085" y3="6.2477742" z3="-2.49721501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07076991" y3="4.94727812" z3="-4.35553239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89196461" y3="5.89558836" z3="-3.79883665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22339305" y3="5.24424244" z3="-4.98123289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71208609" y3="6.95866126" z3="-3.98177876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48418399" y3="-2.20513336" z3="-0.28009098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45905136" y3="-3.00123671" z3="-1.04333842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00598516" y3="-2.58371819" z3="0.61335831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10308266" y3="-1.38840483" z3="-0.69774379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18944356" y3="-1.42866937" z3="-1.15022299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32487517" y3="-0.38698401" z3="-1.49475499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11126376" y3="-1.55853114" z3="-0.95426755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43907061" y3="-2.0805265" z3="-1.99998364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3322,.0465,-.1868;7.3728,.1791,.4374;6.6366,.4477,-.3266;4.7249,1.2318,-2.2579;4.3835,.4262,-1.1837;2.7283,.8421,-3.6638;3.6323,1.7439,-3.1335;1.3845,2.5881,-4.6206;1.5615,1.2473,-4.3777;.5067,2.9241,-5.1814;2.9251,-.4889,-3.4479;3.0944,.031,-1.0066;2.4009,-1.1103,-2.0114;.9289,-.9843,-1.8382;3.1053,-2.4342,-1.8622;-.1365,-3.6115,.6685;-.0279,-5.265,-4.7445;-.2525,-5.0055,-3.7065;-.8413,-4.3083,-1.0868;.7751,-4.599,-2.858;-1.5675,-5.0897,-3.2449;-1.8624,-4.7358,-1.9309;.4931,-4.2654,-1.5318;1.8074,-4.5229,-3.2074;-2.3704,-5.4001,-3.9178;-2.8985,-4.7686,-1.585;-1.0265,-3.8567,.2337;-2.1649,-3.6473,.8827;-3.0527,-4.1132,.4519;-2.1567,-3.5098,2.3493;-2.2095,-3.3194,5.1469;-3.3508,-3.716,3.0553;-.9888,-3.2148,3.0682;-1.0122,-3.1208,4.4568;-3.3765,-3.6227,4.444;-4.2667,-3.9586,2.509;-.0312,-3.0802,2.5612;-.0819,-2.9131,4.994;-4.3139,-3.7932,4.9812;-2.2274,-3.2533,6.2384;1.418,-3.9027,-.6314;2.1765,-3.4022,-1.0877;.519,.2436,-4.714;-3.0847,-1.7239,.027;-2.9017,-.9696,1.185;-1.8386,-.3165,1.5081;-.3676,.5603,1.2023;-.4485,1.4446,-.4322;.9873,-.6906,1.3926;-.3589,1.7676,2.6347;-3.8697,-.9585,2.0903;-3.6317,-.3408,3.3453;-.2069,.7471,-1.2524;.322,2.2384,-.4355;-1.4308,1.922,-.5974;1.012,-1.052,2.4341;1.9608,-.2275,1.157;.8673,-1.5349,.6947;-.4224,1.2397,3.6026;.5797,2.3514,2.6311;-1.1977,2.4835,2.572;-2.7664,-.7965,3.853;-4.5426,-.512,3.9343;-3.4608,.741,3.2204;4.8332,-.717,.9918;4.4033,-2.0421,.8447;3.7534,-2.6944,1.885;3.55,-2.0087,3.0789;4.0324,-.7191,3.2821;4.6823,-.0802,2.2309;4.5042,-2.5338,-.1248;3.355,-3.7016,1.7557;2.6929,-2.6145,4.1028;3.8545,-.2157,4.2327;5.0282,.95,2.3529;-.7963,.4654,-4.2838;-1.778,-.5005,-4.4569;-1.4347,-1.6923,-5.085;-.1509,-1.9241,-5.569;.8242,-.9547,-5.3717;-1.0375,1.3886,-3.7505;-2.7952,-.3537,-4.0925;-2.4488,-2.7402,-5.2213;.0761,-2.864,-6.0723;1.8441,-1.141,-5.7123;2.3719,-1.9276,5.0532;2.312,-3.753,3.9272;-2.2309,-3.6415,-6.0026;-3.4473,-2.6541,-4.5345;7.0636,1.1747,-1.471;6.1073,1.556,-2.4568;8.4314,1.5183,-1.6564;8.8452,2.19,-2.7813;9.1534,1.2258,-.8878;9.8995,2.4374,-2.9174;6.5718,2.2294,-3.6211;7.9028,2.5383,-3.7786;5.8545,2.4947,-4.4014;8.2372,3.0474,-4.6859;3.403,3.1481,-3.332;2.2915,3.5611,-4.1245;4.2094,4.1592,-2.7372;3.9632,5.492,-2.9669;5.0337,3.871,-2.083;4.5995,6.2478,-2.4972;2.0708,4.9473,-4.3555;2.892,5.8956,-3.7988;1.2234,5.2442,-4.9812;2.7121,6.9587,-3.9818;-4.4842,-2.2051,-.2801;-4.4591,-3.0012,-1.0433;-5.006,-2.5837,.6134;-5.1031,-1.3884,-.6977;-2.1894,-1.4287,-1.1502;-2.3249,-.387,-1.4948;-1.1113,-1.5585,-.9543;-2.4391,-2.0805,-2;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650394626562</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004764284665 0.000428384802 0.022820957445 0.005343495083</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030680542 -0.000700658 -0.000019396 0.000077862 0.000164543 0.000336522 0.000380018 0.000471457 0.000589460 0.000810604 0.000935682 0.001060574 0.001244562 0.001343756 0.001379677 0.001422911 0.001562523 0.001820292 0.001834687 0.001951289 0.002213904 0.002407047 0.002636118 0.002682722 0.002711815 0.003019172 0.003125211 0.003481906 0.003543474 0.003908986 0.004457919 0.004718204 0.004791233 0.005084295 0.006011957 0.006118979 0.006144316 0.006632493 0.006966843 0.007756069 0.008107593 0.008242059 0.009308958 0.009513485 0.010008857 0.010650851 0.010965110 0.011080725 0.011771344 0.012249908 0.012931206 0.013131072 0.014043500 0.014571577 0.015154150 0.015504843 0.015720251 0.016266031 0.016933615 0.017474536 0.018118076 0.018491386 0.019424952 0.019572928 0.020029083 0.020804502 0.021222984 0.021436833 0.022595850 0.023154433 0.025050446 0.026221847 0.026796761 0.027016751 0.027705405 0.029486948 0.029653373 0.031501128 0.033296852 0.033579224 0.033955589 0.035792478 0.036900591 0.037685193 0.039593147 0.040057536 0.040850822 0.042337675 0.044266210 0.045209704 0.045446861 0.047073150 0.047817643 0.049234565 0.050418265 0.050985880 0.051181260 0.051394095 0.052482269 0.052650776 0.052914174 0.053112258 0.054713870 0.054932325 0.055965090 0.056267645 0.056513365 0.056674635 0.057188991 0.058977917 0.060414315 0.060898857 0.061700050 0.062286362 0.063299815 0.064507006 0.065345524 0.065921641 0.066520217 0.068119118 0.069053807 0.070254545 0.072730665 0.074495674 0.074774189 0.076306615 0.078371176 0.083917778 0.086386124 0.087097827 0.087474174 0.088722556 0.090454633 0.091004980 0.093207636 0.094604968 0.095451028 0.096413766 0.097846098 0.098802464 0.099084958 0.100135448 0.100765346 0.102445243 0.103192117 0.103428357 0.104043971 0.104411714 0.106259754 0.106942384 0.107539064 0.109713400 0.110901614 0.112000440 0.112685873 0.114928468 0.116162315 0.116657452 0.118682707 0.120678601 0.121411663 0.122994020 0.124387135 0.125487951 0.126118085 0.126411534 0.127085406 0.132001864 0.135078526 0.135788137 0.142785970 0.143682443 0.147038460 0.147582560 0.149718440 0.152654555 0.154686770 0.156254137 0.156760311 0.161521150 0.161878626 0.173591769 0.174110287 0.180022051 0.184478513 0.186191358 0.189595133 0.190365335 0.194100409 0.194725357 0.198456661 0.200207463 0.205223644 0.206899334 0.207326123 0.210214848 0.215067886 0.216573008 0.217891127 0.218979068 0.220714995 0.225271931 0.226507982 0.232146365 0.235120287 0.235541796 0.235930416 0.244610980 0.256017698 0.257254456 0.263690754 0.269889127 0.280368373 0.283153245 0.286311810 0.291668715 0.296718963 0.304362635 0.305763211 0.307297130 0.314301993 0.316712417 0.317378992 0.322212896 0.329852764 0.332852167 0.351784598 0.352159170 0.355094412 0.355763532 0.360097823 0.362825684 0.364149958 0.384462528 0.386031492 0.392171214 0.410683813 0.425715539 0.430929438 0.462353061 0.468701029 0.478361334 0.483661872 0.484382498 0.487952377 0.491433719 0.509577922 0.515432322 0.535304241 0.568726224 0.574694506 0.592510045 0.593969175 0.606459426 0.608177978 0.644692536 0.647084508 0.649481937 0.674300470 0.677996688 0.685891665 0.691922997 0.693528863 0.700078063 0.704416876 0.717689824 0.741406500 0.751255390 0.759343007 0.769680917 0.772848396 0.778815882 0.810979306 0.815365567 0.819715079 0.821735398 0.823537664 0.831616635 0.834875328 0.836336715 0.842425302 0.845817467 0.847525669 0.849754707 0.859172771 0.865896314 0.866744807 0.874095065 0.885313095 0.886006569 0.889695480 0.899782079 0.901013485 0.904094858 0.923433492 0.927598973 0.935758816 0.937156567 0.966173207 0.976069485 0.986081672 1.001159305 1.019117023 1.028308452 1.041915292 1.050880596 1.057577247 1.068820697 1.086636768 1.088727071 1.104539766 1.107092022 1.112488327 1.124804762 1.134072533 1.136080596 1.144417792 1.174857838 1.178999903 1.181187521 1.186907070 1.191435821 1.196225410 1.224652630 1.228345112 1.275090005 1.302366861 1.319742198 1.328263228 1.333301687 1.336306471 1.336415474 1.342837090 1.343148894 1.345050998 1.359205900 1.378743878 1.382970013 1.385024382 1.415854019 1.420349278 1.436728877 1.551486061 1.681632335 1.776365107</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">237</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.32846301" y3="0.0485125" z3="-0.18707621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36724514" y3="0.18097499" z3="0.44190273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63330855" y3="0.45121498" z3="-0.32331452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72620869" y3="1.23384596" z3="-2.25985291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38205704" y3="0.42877724" z3="-1.18593948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73110077" y3="0.84422545" z3="-3.66895208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63578985" y3="1.74543485" z3="-3.13855072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39257143" y3="2.59094648" z3="-4.63259765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5662504" y3="1.25045131" z3="-4.38522453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51692066" y3="2.9271837" z3="-5.19650923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92481758" y3="-0.48663515" z3="-3.45079975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0923544" y3="0.03531376" z3="-1.01042409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39816322" y3="-1.10576487" z3="-2.01449814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92628079" y3="-0.97783623" z3="-1.84222441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10108201" y3="-2.43026541" z3="-1.86391887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13788408" y3="-3.61315508" z3="0.67111779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03284156" y3="-5.26175628" z3="-4.74354183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25704875" y3="-5.0027554" z3="-3.70520263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84298368" y3="-4.30969331" z3="-1.08381919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77171102" y3="-4.59511542" z3="-2.85780055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57125059" y3="-5.0900731" z3="-3.24185232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86499893" y3="-4.73826527" z3="-1.92681735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49066933" y3="-4.26292379" z3="-1.53095994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80355101" y3="-4.51718173" z3="-3.20907066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37290549" y3="-5.40311021" z3="-3.91372411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90023924" y3="-4.77412601" z3="-1.57926215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02736401" y3="-3.8599049" z3="0.23723903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16573984" y3="-3.65044917" z3="0.88690012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05302326" y3="-4.11756654" z3="0.45745861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15573402" y3="-3.51407078" z3="2.35384838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20464785" y3="-3.32672282" z3="5.15182359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.34881116" y3="-3.72232807" z3="3.06152151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9867964" y3="-3.21844086" z3="3.07140268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00872871" y3="-3.12550888" z3="4.46000151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37246828" y3="-3.63068488" z3="4.45037628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26478013" y3="-3.96657479" z3="2.51675094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0292527" y3="-3.08295594" z3="2.56309472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07878116" y3="-2.9158168" z3="4.99583211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.30773418" y3="-3.80488626" z3="4.98875315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22117696" y3="-3.26171393" z3="6.24332096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41477051" y3="-3.8973583" z3="-0.63169152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17269484" y3="-3.39649476" z3="-1.08897708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52189211" y3="0.24765289" z3="-4.71874963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08548562" y3="-1.7289849" z3="0.03084539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90335789" y3="-0.97471425" z3="1.1891947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84122774" y3="-0.31960409" z3="1.51133861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37257273" y3="0.56040881" z3="1.20420267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45576468" y3="1.44460185" z3="-0.43014517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98481369" y3="-0.68826312" z3="1.39338133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36530411" y3="1.76819108" z3="2.63617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87047426" y3="-0.96581326" z3="2.09534624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63274951" y3="-0.34882955" z3="3.35072727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21481832" y3="0.74790333" z3="-1.25122606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31505181" y3="2.23782393" z3="-0.43331902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43784822" y3="1.92220815" z3="-0.59415139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01191047" y3="-1.04905582" z3="2.43504119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95625013" y3="-0.22279651" z3="1.15580771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86480783" y3="-1.53331706" z3="0.69594891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42358807" y3="1.24066619" z3="3.60454322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57034663" y3="2.35633586" z3="2.62962285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20750462" y3="2.47999022" z3="2.57566016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76671064" y3="-0.80385716" z3="3.85770579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54312809" y3="-0.52183024" z3="3.93972736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46329805" y3="0.73329286" z3="3.22667037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82762702" y3="-0.71586433" z3="0.98999753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.39771685" y3="-2.04053434" z3="0.841098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.74785203" y3="-2.69457157" z3="1.8802717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54598015" y3="-2.01124043" z3="3.07587738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02883193" y3="-0.72211913" z3="3.28119317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6774944" y3="-0.08124294" z3="2.2303332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49926999" y3="-2.53074208" z3="-0.12839433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34871991" y3="-3.70131367" z3="1.74879558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6900565" y3="-2.61917532" z3="4.09946488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85298949" y3="-0.22096957" z3="4.23403085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0238674" y3="0.94859236" z3="2.35415443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79189622" y3="0.47218206" z3="-4.28683741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77524542" y3="-0.49379453" z3="-4.45826762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43408754" y3="-1.68692473" z3="-5.0833198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15157772" y3="-1.92118597" z3="-5.56931624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82486813" y3="-0.95252082" z3="-5.37751448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03104489" y3="1.39681113" z3="-3.75560393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79113004" y3="-0.34484632" z3="-4.09169926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44953269" y3="-2.73381214" z3="-5.21553906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07318711" y3="-2.8622815" z3="-6.07123658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84392805" y3="-1.14086562" z3="-5.71902264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36857451" y3="-1.93375221" z3="5.05052065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31020128" y3="-3.75796938" z3="3.92261154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23438336" y3="-3.63605381" z3="-5.99629258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44654982" y3="-2.64635094" z3="-4.52646288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06302599" y3="1.17827802" z3="-1.4666544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10952796" y3="1.55896744" z3="-2.45521221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43033654" y3="1.52045524" z3="-1.6487032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84649674" y3="2.18884176" z3="-2.77337384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15059545" y3="1.23143112" z3="-0.87689741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90290853" y3="2.4474198" z3="-2.90345389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57712222" y3="2.23104844" z3="-3.61885192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90710375" y3="2.53596319" z3="-3.77371785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86244419" y3="2.49615683" z3="-4.40137357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24408783" y3="3.04882151" z3="-4.67973901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40924023" y3="3.14961727" z3="-3.34092259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30120124" y3="3.56259926" z3="-4.13817347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21490614" y3="4.16133332" z3="-2.74479505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97303381" y3="5.49377686" z3="-2.97966502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03604817" y3="3.87336198" z3="-2.0866303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60942737" y3="6.24928078" z3="-2.50991726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08508588" y3="4.94808442" z3="-4.37478184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90616343" y3="5.8969676" z3="-3.8172827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23977835" y3="5.24604618" z3="-5.0028901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72983876" y3="6.95977395" z3="-4.00459972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48499447" y3="-2.21065158" z3="-0.2765383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45966095" y3="-3.00703444" z3="-1.03986887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00700771" y3="-2.58920317" z3="0.61694942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10373821" y3="-1.39368036" z3="-0.6940524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1908635" y3="-1.4313806" z3="-1.14619343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3270999" y3="-0.38895025" z3="-1.48839288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11391326" y3="-1.5599303" z3="-0.94982179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44220778" y3="-2.08093744" z3="-1.99841238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3285,.0485,-.1871;7.3672,.181,.4419;6.6333,.4512,-.3233;4.7262,1.2338,-2.2599;4.3821,.4288,-1.1859;2.7311,.8442,-3.669;3.6358,1.7454,-3.1386;1.3926,2.5909,-4.6326;1.5663,1.2505,-4.3852;.5169,2.9272,-5.1965;2.9248,-.4866,-3.4508;3.0924,.0353,-1.0104;2.3982,-1.1058,-2.0145;.9263,-.9778,-1.8422;3.1011,-2.4303,-1.8639;-.1379,-3.6132,.6711;-.0328,-5.2618,-4.7435;-.257,-5.0028,-3.7052;-.843,-4.3097,-1.0838;.7717,-4.5951,-2.8578;-1.5713,-5.0901,-3.2419;-1.865,-4.7383,-1.9268;.4907,-4.2629,-1.531;1.8036,-4.5172,-3.2091;-2.3729,-5.4031,-3.9137;-2.9002,-4.7741,-1.5793;-1.0274,-3.8599,.2372;-2.1657,-3.6504,.8869;-3.053,-4.1176,.4575;-2.1557,-3.5141,2.3538;-2.2046,-3.3267,5.1518;-3.3488,-3.7223,3.0615;-.9868,-3.2184,3.0714;-1.0087,-3.1255,4.46;-3.3725,-3.6307,4.4504;-4.2648,-3.9666,2.5168;-.0293,-3.083,2.5631;-.0788,-2.9158,4.9958;-4.3077,-3.8049,4.9888;-2.2212,-3.2617,6.2433;1.4148,-3.8974,-.6317;2.1727,-3.3965,-1.089;.5219,.2477,-4.7187;-3.0855,-1.729,.0308;-2.9034,-.9747,1.1892;-1.8412,-.3196,1.5113;-.3726,.5604,1.2042;-.4558,1.4446,-.4301;.9848,-.6883,1.3934;-.3653,1.7682,2.6362;-3.8705,-.9658,2.0953;-3.6327,-.3488,3.3507;-.2148,.7479,-1.2512;.3151,2.2378,-.4333;-1.4378,1.9222,-.5942;1.0119,-1.0491,2.435;1.9563,-.2228,1.1558;.8648,-1.5333,.6959;-.4236,1.2407,3.6045;.5703,2.3563,2.6296;-1.2075,2.48,2.5757;-2.7667,-.8039,3.8577;-4.5431,-.5218,3.9397;-3.4633,.7333,3.2267;4.8276,-.7159,.99;4.3977,-2.0405,.8411;3.7479,-2.6946,1.8803;3.546,-2.0112,3.0759;4.0288,-.7221,3.2812;4.6775,-.0812,2.2303;4.4993,-2.5307,-.1284;3.3487,-3.7013,1.7488;2.6901,-2.6192,4.0995;3.853,-.221,4.234;5.0239,.9486,2.3542;-.7919,.4722,-4.2868;-1.7752,-.4938,-4.4583;-1.4341,-1.6869,-5.0833;-.1516,-1.9212,-5.5693;.8249,-.9525,-5.3775;-1.031,1.3968,-3.7556;-2.7911,-.3448,-4.0917;-2.4495,-2.7338,-5.2155;.0732,-2.8623,-6.0712;1.8439,-1.1409,-5.719;2.3686,-1.9338,5.0505;2.3102,-3.758,3.9226;-2.2344,-3.6361,-5.9963;-3.4465,-2.6464,-4.5265;7.063,1.1783,-1.4667;6.1095,1.559,-2.4552;8.4303,1.5205,-1.6487;8.8465,2.1888,-2.7734;9.1506,1.2314,-.8769;9.9029,2.4474,-2.9035;6.5771,2.231,-3.6189;7.9071,2.536,-3.7737;5.8624,2.4962,-4.4014;8.2441,3.0488,-4.6797;3.4092,3.1496,-3.3409;2.3012,3.5626,-4.1382;4.2149,4.1613,-2.7448;3.973,5.4938,-2.9797;5.036,3.8734,-2.0866;4.6094,6.2493,-2.5099;2.0851,4.9481,-4.3748;2.9062,5.897,-3.8173;1.2398,5.246,-5.0029;2.7298,6.9598,-4.0046;-4.485,-2.2107,-.2765;-4.4597,-3.007,-1.0399;-5.007,-2.5892,.6169;-5.1037,-1.3937,-.6941;-2.1909,-1.4314,-1.1462;-2.3271,-.389,-1.4884;-1.1139,-1.5599,-.9498;-2.4422,-2.0809,-1.9984;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650391534913</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003590699484 0.000342379476 0.016833731636 0.005341377659</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030680073 -0.000711282 0.000045912 0.000090411 0.000202485 0.000329519 0.000377368 0.000454827 0.000586554 0.000804247 0.000936871 0.001061750 0.001239067 0.001343827 0.001381464 0.001422608 0.001561754 0.001820762 0.001832675 0.001950720 0.002212029 0.002407043 0.002633759 0.002683606 0.002706807 0.003020956 0.003118670 0.003481046 0.003537922 0.003910105 0.004458186 0.004718613 0.004791710 0.005084439 0.006014356 0.006126410 0.006144184 0.006630922 0.006975454 0.007758285 0.008107579 0.008241591 0.009309703 0.009516760 0.010012646 0.010650644 0.010965043 0.011080669 0.011770483 0.012253419 0.012932295 0.013133350 0.014049170 0.014571398 0.015159293 0.015508369 0.015720549 0.016273225 0.016935980 0.017474502 0.018118308 0.018501773 0.019425001 0.019574098 0.020034250 0.020805210 0.021223122 0.021436808 0.022596045 0.023154449 0.025049305 0.026246888 0.026796822 0.027038383 0.027713840 0.029487566 0.029655762 0.031503814 0.033296948 0.033581712 0.033955541 0.035794262 0.036901262 0.037691697 0.039594546 0.040058259 0.040851069 0.042340050 0.044266246 0.045210193 0.045446910 0.047073124 0.047820544 0.049235888 0.050417968 0.050987741 0.051190923 0.051407051 0.052482224 0.052651383 0.052915436 0.053112215 0.054717471 0.054934786 0.055966528 0.056269285 0.056513351 0.056677816 0.057189799 0.059000098 0.060421479 0.060899488 0.061700067 0.062295414 0.063306541 0.064507044 0.065355092 0.065921895 0.066528613 0.068171198 0.069056395 0.070255183 0.072731102 0.074495776 0.074777448 0.076316813 0.078390621 0.083958797 0.086438533 0.087097811 0.087487570 0.088785741 0.090474796 0.091008128 0.093261453 0.094605658 0.095451236 0.096413947 0.097846926 0.098808535 0.099089100 0.100141310 0.100791467 0.102446874 0.103192540 0.103430928 0.104051378 0.104415980 0.106292810 0.106947681 0.107613400 0.109713390 0.110912598 0.112035047 0.112732343 0.114928486 0.116163949 0.116679291 0.118683247 0.120678361 0.121490619 0.123012292 0.124396381 0.125503834 0.126131614 0.126451726 0.127085081 0.132006879 0.135079292 0.135790099 0.142786770 0.143690843 0.147042901 0.147582517 0.149718558 0.152679523 0.154687077 0.156265335 0.156770026 0.161528863 0.161878583 0.173609031 0.174111509 0.180034634 0.184512480 0.186193263 0.189600491 0.190365665 0.194100594 0.194725398 0.198460633 0.200207690 0.205223712 0.206900882 0.207326091 0.210217534 0.215146538 0.216574647 0.217890847 0.219013054 0.220719728 0.225275184 0.226522798 0.232146494 0.235120541 0.235564705 0.235930708 0.244612950 0.256017869 0.257254523 0.263690478 0.269897840 0.280368602 0.283163776 0.286313180 0.291689696 0.296722791 0.304364204 0.305762987 0.307297268 0.314304103 0.316722849 0.317379003 0.322212978 0.329882998 0.332852196 0.351784692 0.352159724 0.355095445 0.355763960 0.360098446 0.362827575 0.364152452 0.384462589 0.386032742 0.392173810 0.410689488 0.425716001 0.430939275 0.462353046 0.468720449 0.478366158 0.483663801 0.484412435 0.487975127 0.491433884 0.509582481 0.515447288 0.535308781 0.568808957 0.574873854 0.592537609 0.593970500 0.606459492 0.608192750 0.644692384 0.647093981 0.649491682 0.674301132 0.678044620 0.685893515 0.691937516 0.693529023 0.700078386 0.704418138 0.717767005 0.741435038 0.751263863 0.759368083 0.769683546 0.772937063 0.778826786 0.810985463 0.815376468 0.819739516 0.821789603 0.823537987 0.831616615 0.834890907 0.836367304 0.842425343 0.845817711 0.847525735 0.849755234 0.859178756 0.865898894 0.866780988 0.874115045 0.885324737 0.886058457 0.889695885 0.899824924 0.901014359 0.904099964 0.923435751 0.927642527 0.935766490 0.937176485 0.966176915 0.976079338 0.986085337 1.001159651 1.019117013 1.028318156 1.041916983 1.050882408 1.057582416 1.068822781 1.086640284 1.088733040 1.104557186 1.107095277 1.112491930 1.124853449 1.135139681 1.136141507 1.144488019 1.174862699 1.179006201 1.181206984 1.186909982 1.191446760 1.196241464 1.224652649 1.228345469 1.275095840 1.302415387 1.319776392 1.328263568 1.333339590 1.336307205 1.336417097 1.342884488 1.343155583 1.345051109 1.359206086 1.378744833 1.382973776 1.385094935 1.415881939 1.420354032 1.436731901 1.551486148 1.681647132 1.776365785</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">238</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.32838219" y3="0.05290745" z3="-0.18795467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.36839074" y3="0.18021805" z3="0.43917961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63414923" y3="0.45075816" z3="-0.3260168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72792488" y3="1.23729772" z3="-2.26170871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38222853" y3="0.43471742" z3="-1.18644136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73445951" y3="0.84747228" z3="-3.67218637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63890003" y3="1.74921201" z3="-3.14194635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39896877" y3="2.59293362" z3="-4.64194668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57140071" y3="1.2526272" z3="-4.39202155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52417923" y3="2.9288088" z3="-5.20747075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92666278" y3="-0.48316177" z3="-3.45051045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09157174" y3="0.04370103" z3="-1.01030274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39663547" y3="-1.09812235" z3="-2.01342681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92470391" y3="-0.96753609" z3="-1.84347921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0974324" y3="-2.42350598" z3="-1.85976657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14002213" y3="-3.61628428" z3="0.67523002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03405818" y3="-5.24995249" z3="-4.74373235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25784225" y3="-4.99503081" z3="-3.70437143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84479121" y3="-4.30972791" z3="-1.08117786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76996329" y3="-4.58563885" z3="-2.85673495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57139755" y3="-5.08833718" z3="-3.24030785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86558192" y3="-4.74072528" z3="-1.92426221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48856493" y3="-4.25748266" z3="-1.52898024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80072085" y3="-4.50168031" z3="-3.20820692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37319477" y3="-5.40211931" z3="-3.9125708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90015122" y3="-4.78243856" z3="-1.57586539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02969607" y3="-3.86227138" z3="0.24064513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16822077" y3="-3.65244678" z3="0.88978226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05588354" y3="-4.11856017" z3="0.45961131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15861314" y3="-3.5178585" z3="2.3568149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2068715" y3="-3.33811966" z3="5.1551951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35134827" y3="-3.72840226" z3="3.06402146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98999106" y3="-3.22309597" z3="3.07477706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01135878" y3="-3.1340911" z3="4.46372573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37466073" y3="-3.64052022" z3="4.45315897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26759019" y3="-3.97088448" z3="2.51848219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0334228" y3="-3.0844984" z3="2.56677966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0807363" y3="-2.92598551" z3="4.9997852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31024851" y3="-3.81578935" z3="4.99146054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22278331" y3="-3.27673003" z3="6.24699586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41208455" y3="-3.8905751" z3="-0.62923878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16965062" y3="-3.3882845" z3="-1.0859417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52683837" y3="0.24981978" z3="-4.7242323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08627743" y3="-1.73084513" z3="0.03395388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90736918" y3="-0.97800582" z3="1.19375709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84729372" y3="-0.32110898" z3="1.51912089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37764213" y3="0.55807639" z3="1.21207019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46046926" y3="1.44800755" z3="-0.41929565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97971399" y3="-0.69149138" z3="1.39417261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36857952" y3="1.76083886" z3="2.64816775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87626508" y3="-0.97251078" z3="2.097985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64162024" y3="-0.35853229" z3="3.35547052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2215979" y3="0.75380795" z3="-1.24325341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31290295" y3="2.23879789" z3="-0.42012477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44103269" y3="1.92986932" z3="-0.5809948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01098953" y3="-1.05360753" z3="2.43520929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95098671" y3="-0.22616902" z3="1.15378389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85739166" y3="-1.53589443" z3="0.69645368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42283858" y3="1.22947922" z3="3.61490215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56535305" y3="2.35179231" z3="2.64094513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21315455" y3="2.47056928" z3="2.59249389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77471923" y3="-0.81238781" z3="3.86205874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55205792" y3="-0.53591751" z3="3.94321979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47530227" y3="0.72433031" z3="3.2346977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82672038" y3="-0.7103688" z3="0.98969461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.39889972" y3="-2.03594769" z3="0.84172401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.74910338" y3="-2.68973197" z3="1.88119942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5440039" y3="-2.00511555" z3="3.07531874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0238774" y3="-0.71479766" z3="3.27929949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67351188" y3="-0.07430638" z3="2.22885321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50113368" y3="-2.52678254" z3="-0.12802882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35234505" y3="-3.69732425" z3="1.75103266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68801083" y3="-2.61331782" z3="4.09872762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84436515" y3="-0.21217728" z3="4.2299069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01792178" y3="0.95624391" z3="2.35168132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78695349" y3="0.47525662" z3="-4.29173387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77046089" y3="-0.49024756" z3="-4.45941349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43012387" y3="-1.68468212" z3="-5.08425278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14767029" y3="-1.92019259" z3="-5.56992944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82924426" y3="-0.95153823" z3="-5.37822521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02550593" y3="1.40091601" z3="-3.76152894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7865364" y3="-0.34048942" z3="-4.09316282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44602494" y3="-2.73136977" z3="-5.21604733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0766449" y3="-2.86225158" z3="-6.07036222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8482588" y3="-1.1410784" z3="-5.7197121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36309283" y3="-1.92685586" z3="5.04817296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31206681" y3="-3.75355993" z3="3.92378161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23120379" y3="-3.6343255" z3="-5.99599144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44312136" y3="-2.64233622" z3="-4.52744627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06493289" y3="1.17514443" z3="-1.47041136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11151589" y3="1.55719019" z3="-2.45868061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43360916" y3="1.51484896" z3="-1.6534436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85116924" y3="2.18375413" z3="-2.77828941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15326507" y3="1.22213968" z3="-0.88280116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90630202" y3="2.43093782" z3="-2.91183896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58002732" y3="2.22702288" z3="-3.62328567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91180142" y3="2.53266904" z3="-3.77812504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86543952" y3="2.49298735" z3="-4.4056355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24922836" y3="3.04121919" z3="-4.68518308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4140011" y3="3.15302331" z3="-3.34769643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30728694" y3="3.5653423" z3="-4.14717612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2204167" y3="4.16450053" z3="-2.75353343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97905878" y3="5.49708354" z3="-2.99032267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04062829" y3="3.87697601" z3="-2.09399878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61555102" y3="6.25293134" z3="-2.52143268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09224842" y3="4.95066607" z3="-4.38636153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91338062" y3="5.89954737" z3="-3.82977953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24862036" y3="5.24732126" z3="-5.01727651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73739447" y3="6.9624042" z3="-4.0185002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48442971" y3="-2.21393374" z3="-0.27690834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.456084" y3="-3.0078154" z3="-1.04230796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00715124" y3="-2.59589444" z3="0.61473985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10373251" y3="-1.39710556" z3="-0.69357733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19002729" y3="-1.43116202" z3="-1.14152441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32687498" y3="-0.38917834" z3="-1.48417944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11172869" y3="-1.55986015" z3="-0.94449897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43725233" y3="-2.08142756" z3="-1.99320498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3284,.0529,-.188;7.3684,.1802,.4392;6.6341,.4508,-.326;4.7279,1.2373,-2.2617;4.3822,.4347,-1.1864;2.7345,.8475,-3.6722;3.6389,1.7492,-3.1419;1.399,2.5929,-4.6419;1.5714,1.2526,-4.392;.5242,2.9288,-5.2075;2.9267,-.4832,-3.4505;3.0916,.0437,-1.0103;2.3966,-1.0981,-2.0134;.9247,-.9675,-1.8435;3.0974,-2.4235,-1.8598;-.14,-3.6163,.6752;-.0341,-5.25,-4.7437;-.2578,-4.995,-3.7044;-.8448,-4.3097,-1.0812;.77,-4.5856,-2.8567;-1.5714,-5.0883,-3.2403;-1.8656,-4.7407,-1.9243;.4886,-4.2575,-1.529;1.8007,-4.5017,-3.2082;-2.3732,-5.4021,-3.9126;-2.9002,-4.7824,-1.5759;-1.0297,-3.8623,.2406;-2.1682,-3.6524,.8898;-3.0559,-4.1186,.4596;-2.1586,-3.5179,2.3568;-2.2069,-3.3381,5.1552;-3.3513,-3.7284,3.064;-.99,-3.2231,3.0748;-1.0114,-3.1341,4.4637;-3.3747,-3.6405,4.4532;-4.2676,-3.9709,2.5185;-.0334,-3.0845,2.5668;-.0807,-2.926,4.9998;-4.3102,-3.8158,4.9915;-2.2228,-3.2767,6.247;1.4121,-3.8906,-.6292;2.1697,-3.3883,-1.0859;.5268,.2498,-4.7242;-3.0863,-1.7308,.034;-2.9074,-.978,1.1938;-1.8473,-.3211,1.5191;-.3776,.5581,1.2121;-.4605,1.448,-.4193;.9797,-.6915,1.3942;-.3686,1.7608,2.6482;-3.8763,-.9725,2.098;-3.6416,-.3585,3.3555;-.2216,.7538,-1.2433;.3129,2.2388,-.4201;-1.441,1.9299,-.581;1.011,-1.0536,2.4352;1.951,-.2262,1.1538;.8574,-1.5359,.6965;-.4228,1.2295,3.6149;.5654,2.3518,2.6409;-1.2132,2.4706,2.5925;-2.7747,-.8124,3.8621;-4.5521,-.5359,3.9432;-3.4753,.7243,3.2347;4.8267,-.7104,.9897;4.3989,-2.0359,.8417;3.7491,-2.6897,1.8812;3.544,-2.0051,3.0753;4.0239,-.7148,3.2793;4.6735,-.0743,2.2289;4.5011,-2.5268,-.128;3.3523,-3.6973,1.751;2.688,-2.6133,4.0987;3.8444,-.2122,4.2299;5.0179,.9562,2.3517;-.787,.4753,-4.2917;-1.7705,-.4902,-4.4594;-1.4301,-1.6847,-5.0843;-.1477,-1.9202,-5.5699;.8292,-.9515,-5.3782;-1.0255,1.4009,-3.7615;-2.7865,-.3405,-4.0932;-2.446,-2.7314,-5.216;.0766,-2.8623,-6.0704;1.8483,-1.1411,-5.7197;2.3631,-1.9269,5.0482;2.3121,-3.7536,3.9238;-2.2312,-3.6343,-5.996;-3.4431,-2.6423,-4.5274;7.0649,1.1751,-1.4704;6.1115,1.5572,-2.4587;8.4336,1.5148,-1.6534;8.8512,2.1838,-2.7783;9.1533,1.2221,-.8828;9.9063,2.4309,-2.9118;6.58,2.227,-3.6233;7.9118,2.5327,-3.7781;5.8654,2.493,-4.4056;8.2492,3.0412,-4.6852;3.414,3.153,-3.3477;2.3073,3.5653,-4.1472;4.2204,4.1645,-2.7535;3.9791,5.4971,-2.9903;5.0406,3.877,-2.094;4.6156,6.2529,-2.5214;2.0922,4.9507,-4.3864;2.9134,5.8995,-3.8298;1.2486,5.2473,-5.0173;2.7374,6.9624,-4.0185;-4.4844,-2.2139,-.2769;-4.4561,-3.0078,-1.0423;-5.0072,-2.5959,.6147;-5.1037,-1.3971,-.6936;-2.19,-1.4312,-1.1415;-2.3269,-.3892,-1.4842;-1.1117,-1.5599,-.9445;-2.4373,-2.0814,-1.9932;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650399660530</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002523261381 0.000301288605 0.018262671328 0.005337167822</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030680372 -0.000555023 0.000059189 0.000112450 0.000151990 0.000322721 0.000372596 0.000467564 0.000587263 0.000809253 0.000940324 0.001061723 0.001244777 0.001345210 0.001381052 0.001423204 0.001565784 0.001820761 0.001833051 0.001951114 0.002211243 0.002407093 0.002634145 0.002683909 0.002706583 0.003021427 0.003116921 0.003480817 0.003536908 0.003909838 0.004458264 0.004719289 0.004793495 0.005084525 0.006015984 0.006132452 0.006146551 0.006630868 0.006979189 0.007759043 0.008107685 0.008241733 0.009310097 0.009519500 0.010015891 0.010651534 0.010965627 0.011080575 0.011771521 0.012252978 0.012936432 0.013131215 0.014052265 0.014571974 0.015165206 0.015510396 0.015721270 0.016279865 0.016945852 0.017474863 0.018118591 0.018508462 0.019425309 0.019574848 0.020038991 0.020806631 0.021223193 0.021437228 0.022596029 0.023154718 0.025049219 0.026266413 0.026796582 0.027069948 0.027718385 0.029488905 0.029657074 0.031505518 0.033297452 0.033582090 0.033956084 0.035794013 0.036901781 0.037696435 0.039597873 0.040058545 0.040851287 0.042340415 0.044266275 0.045212257 0.045447469 0.047073322 0.047820778 0.049237078 0.050418137 0.050988632 0.051197880 0.051414315 0.052482393 0.052652967 0.052916214 0.053112205 0.054719282 0.054937999 0.055966463 0.056270537 0.056513574 0.056680325 0.057189858 0.059014102 0.060427012 0.060900936 0.061700130 0.062301145 0.063312010 0.064507337 0.065359726 0.065923461 0.066533064 0.068210619 0.069057920 0.070255562 0.072731393 0.074495721 0.074778220 0.076320621 0.078405754 0.083985893 0.086471395 0.087098025 0.087498754 0.088824227 0.090491683 0.091008324 0.093304719 0.094606497 0.095451581 0.096414625 0.097847265 0.098811454 0.099089116 0.100141856 0.100796760 0.102448537 0.103192655 0.103434259 0.104054009 0.104430168 0.106306415 0.106949306 0.107690303 0.109713387 0.110921796 0.112071327 0.112766432 0.114931884 0.116164823 0.116689370 0.118684601 0.120681705 0.121542772 0.123032197 0.124402322 0.125516816 0.126151161 0.126486198 0.127085649 0.132013287 0.135079570 0.135793944 0.142787830 0.143701024 0.147045483 0.147583809 0.149719065 0.152700059 0.154687377 0.156274961 0.156779500 0.161535226 0.161878853 0.173626333 0.174112151 0.180061007 0.184546707 0.186193748 0.189605636 0.190366124 0.194101261 0.194727745 0.198461354 0.200207821 0.205226085 0.206903032 0.207326540 0.210220646 0.215189766 0.216575972 0.217891649 0.219030364 0.220728606 0.225276280 0.226531132 0.232146835 0.235120525 0.235577816 0.235931100 0.244613701 0.256018304 0.257254559 0.263690738 0.269902856 0.280368753 0.283165086 0.286314328 0.291705125 0.296726608 0.304365328 0.305763365 0.307299804 0.314304625 0.316733020 0.317379184 0.322213184 0.329903112 0.332852403 0.351785833 0.352159686 0.355095623 0.355766005 0.360098521 0.362829756 0.364153910 0.384462647 0.386033129 0.392174302 0.410695456 0.425715985 0.430943992 0.462353040 0.468742334 0.478368578 0.483666317 0.484424856 0.487978556 0.491435428 0.509584096 0.515462380 0.535311572 0.568869351 0.574987952 0.592559963 0.593970491 0.606463596 0.608195471 0.644694583 0.647097998 0.649492128 0.674301727 0.678070183 0.685897520 0.691949506 0.693529423 0.700078466 0.704419285 0.717836358 0.741466486 0.751275536 0.759377918 0.769685489 0.773014331 0.778839562 0.810987447 0.815401402 0.819769857 0.821851062 0.823538112 0.831617312 0.834899110 0.836390767 0.842426207 0.845819476 0.847526771 0.849756499 0.859178995 0.865902814 0.866816156 0.874134002 0.885342123 0.886083785 0.889697007 0.899853155 0.901016262 0.904107616 0.923437201 0.927696760 0.935770801 0.937241749 0.966178377 0.976084855 0.986087162 1.001160325 1.019124927 1.028318213 1.041916960 1.050884208 1.057584249 1.068822896 1.086646473 1.088737493 1.104567705 1.107107307 1.112496202 1.124866001 1.135747748 1.136399441 1.144544739 1.174864478 1.179008282 1.181222536 1.186910824 1.191457372 1.196259418 1.224653021 1.228345533 1.275097181 1.302479376 1.319808341 1.328265145 1.333346603 1.336318301 1.336418418 1.342886240 1.343155663 1.345056617 1.359206630 1.378748847 1.382973907 1.385130573 1.415894843 1.420367028 1.436732455 1.551486186 1.681655237 1.776367265</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">239</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33121327" y3="0.05573174" z3="-0.1895067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37345215" y3="0.17471301" z3="0.43121727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63831582" y3="0.44847623" z3="-0.3316551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72954298" y3="1.23933437" z3="-2.26319771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38401409" y3="0.43903175" z3="-1.18633945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73472563" y3="0.84925708" z3="-3.67089633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64002271" y3="1.750849" z3="-3.14295813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39834826" y3="2.59395955" z3="-4.64038061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5713323" y3="1.25412975" z3="-4.38995174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52326009" y3="2.92936582" z3="-5.205646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9260583" y3="-0.48091396" z3="-3.44693399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09291871" y3="0.05074723" z3="-1.00799538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39673977" y3="-1.09252569" z3="-2.00833723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92503359" y3="-0.96061861" z3="-1.83833148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09723191" y3="-2.41781737" z3="-1.85240097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14223803" y3="-3.61921239" z3="0.67733079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02810542" y3="-5.24294584" z3="-4.74410316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25391683" y3="-4.98929866" z3="-3.70482055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84457982" y3="-4.30907546" z3="-1.0813482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77206614" y3="-4.5783589" z3="-2.85594868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56768716" y3="-5.08627232" z3="-3.24211665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8637911" y3="-4.74101486" z3="-1.92582542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48891119" y3="-4.25290786" z3="-1.52787712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80349118" y3="-4.49283547" z3="-3.20684818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36782619" y3="-5.40107893" z3="-3.91548753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8990317" y3="-4.78450634" z3="-1.57822215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03121789" y3="-3.86447323" z3="0.24110587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17051478" y3="-3.65434539" z3="0.88892895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05790797" y3="-4.11935298" z3="0.45724607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16221289" y3="-3.52104782" z3="2.3562388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2137348" y3="-3.3421963" z3="5.15464568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35592174" y3="-3.7311311" z3="3.06227977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99405001" y3="-3.22744585" z3="3.0755285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01705507" y3="-3.1388569" z3="4.46439413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38088981" y3="-3.64369276" z3="4.45138357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27154096" y3="-3.97313024" z3="2.51596356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0361152" y3="-3.0901027" z3="2.56852811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08732825" y3="-2.93068012" z3="5.00112306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31709955" y3="-3.81880649" z3="4.98857926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23132581" y3="-3.2808717" z3="6.24632196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41047857" y3="-3.88573325" z3="-0.62652758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16894594" y3="-3.38270007" z3="-1.08143818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52782346" y3="0.25024271" z3="-4.72269004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0856246" y3="-1.73120532" z3="0.0333022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90957799" y3="-0.97971523" z3="1.19456672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85053166" y3="-0.32284671" z3="1.52370503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37891996" y3="0.55406898" z3="1.21856641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4632498" y3="1.45076426" z3="-0.40891191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97696461" y3="-0.69818084" z3="1.39442435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36562382" y3="1.75007425" z3="2.66046804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8808494" y3="-0.97548109" z3="2.09647104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64988918" y3="-0.36245046" z3="3.35507052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22469945" y3="0.76071424" z3="-1.23626601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31017436" y3="2.24153333" z3="-0.40647257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4438642" y3="1.93322826" z3="-0.56788753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00950443" y3="-1.06234941" z3="2.43480715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94791378" y3="-0.23300585" z3="1.15325898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85260992" y3="-1.54092835" z3="0.69518321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41773542" y3="1.21351046" z3="3.62428053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56867941" y3="2.34049995" z3="2.65455957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21010788" y3="2.46025031" z3="2.61075656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78384084" y3="-0.81586421" z3="3.86317938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56166193" y3="-0.54143749" z3="3.94038706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48415479" y3="0.72081345" z3="3.23583874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8289041" y3="-0.70425432" z3="0.98996712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40426069" y3="-2.0311047" z3="0.84611494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75343157" y3="-2.68238215" z3="1.88649271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5450066" y3="-1.99394501" z3="3.07809107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02174058" y3="-0.70186084" z3="3.27828503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67167813" y3="-0.06388338" z3="2.22643701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51055985" y3="-2.5255064" z3="-0.12061926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35835436" y3="-3.69114588" z3="1.75872402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.687184" y3="-2.59975217" z3="4.10140264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8404001" y3="-0.19647876" z3="4.22788683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01373929" y3="0.9677716" z3="2.34621389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78645439" y3="0.474875" z3="-4.29201829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76923141" y3="-0.49158897" z3="-4.46262293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42724766" y3="-1.68553784" z3="-5.08591645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14388184" y3="-1.92043361" z3="-5.56991801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83208263" y3="-0.95133056" z3="-5.37821722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02606829" y3="1.40035583" z3="-3.76226681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78554613" y3="-0.34234761" z3="-4.09694669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44253268" y3="-2.73236089" z3="-5.219376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08171256" y3="-2.86252334" z3="-6.06974963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85179552" y3="-1.14038077" z3="-5.71770831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35783116" y3="-1.91008868" z3="5.04666323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31325571" y3="-3.74140202" z3="3.92938361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22542043" y3="-3.63553219" z3="-5.99867397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44141499" y3="-2.6436102" z3="-4.53327639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06867869" y3="1.17051338" z3="-1.47799871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11395841" y3="1.55661912" z3="-2.46327499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43787043" y3="1.50216546" z3="-1.66664068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85412425" y3="2.16592292" z3="-2.79405131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15946673" y3="1.20827034" z3="-0.89795017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91185802" y3="2.41525042" z3="-2.92948641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58139556" y3="2.22448682" z3="-3.62949026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91290981" y3="2.51931259" z3="-3.7904925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86528574" y3="2.49362739" z3="-4.40932426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24966454" y3="3.02786158" z3="-4.69863597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41475803" y3="3.15459192" z3="-3.34893906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30659596" y3="3.56648708" z3="-4.14654043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22147041" y3="4.16685508" z3="-2.75541594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97912805" y3="5.49893904" z3="-2.9915012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04352218" y3="3.87941764" z3="-2.09809956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61552425" y3="6.25538417" z3="-2.52289647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08982728" y3="4.95190287" z3="-4.38401687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91110128" y3="5.90121451" z3="-3.82806144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24417754" y3="5.24900227" z3="-5.01198496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73424103" y3="6.9636918" z3="-4.01601918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48344738" y3="-2.21326906" z3="-0.28157414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45401521" y3="-3.0051495" z3="-1.04944175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0078827" y3="-2.59784482" z3="0.60796051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10227526" y3="-1.39505701" z3="-0.69649936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18619112" y3="-1.43037797" z3="-1.13934814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32487982" y3="-0.38844306" z3="-1.48277212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10968963" y3="-1.55469197" z3="-0.93768414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43000345" y3="-2.08144989" z3="-1.99253045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3312,.0557,-.1895;7.3735,.1747,.4312;6.6383,.4485,-.3317;4.7295,1.2393,-2.2632;4.384,.439,-1.1863;2.7347,.8493,-3.6709;3.64,1.7508,-3.143;1.3983,2.594,-4.6404;1.5713,1.2541,-4.39;.5233,2.9294,-5.2056;2.9261,-.4809,-3.4469;3.0929,.0507,-1.008;2.3967,-1.0925,-2.0083;.925,-.9606,-1.8383;3.0972,-2.4178,-1.8524;-.1422,-3.6192,.6773;-.0281,-5.2429,-4.7441;-.2539,-4.9893,-3.7048;-.8446,-4.3091,-1.0813;.7721,-4.5784,-2.8559;-1.5677,-5.0863,-3.2421;-1.8638,-4.741,-1.9258;.4889,-4.2529,-1.5279;1.8035,-4.4928,-3.2068;-2.3678,-5.4011,-3.9155;-2.899,-4.7845,-1.5782;-1.0312,-3.8645,.2411;-2.1705,-3.6543,.8889;-3.0579,-4.1194,.4572;-2.1622,-3.521,2.3562;-2.2137,-3.3422,5.1546;-3.3559,-3.7311,3.0623;-.9941,-3.2274,3.0755;-1.0171,-3.1389,4.4644;-3.3809,-3.6437,4.4514;-4.2715,-3.9731,2.516;-.0361,-3.0901,2.5685;-.0873,-2.9307,5.0011;-4.3171,-3.8188,4.9886;-2.2313,-3.2809,6.2463;1.4105,-3.8857,-.6265;2.1689,-3.3827,-1.0814;.5278,.2502,-4.7227;-3.0856,-1.7312,.0333;-2.9096,-.9797,1.1946;-1.8505,-.3228,1.5237;-.3789,.5541,1.2186;-.4632,1.4508,-.4089;.977,-.6982,1.3944;-.3656,1.7501,2.6605;-3.8808,-.9755,2.0965;-3.6499,-.3625,3.3551;-.2247,.7607,-1.2363;.3102,2.2415,-.4065;-1.4439,1.9332,-.5679;1.0095,-1.0623,2.4348;1.9479,-.233,1.1533;.8526,-1.5409,.6952;-.4177,1.2135,3.6243;.5687,2.3405,2.6546;-1.2101,2.4603,2.6108;-2.7838,-.8159,3.8632;-4.5617,-.5414,3.9404;-3.4842,.7208,3.2358;4.8289,-.7043,.99;4.4043,-2.0311,.8461;3.7534,-2.6824,1.8865;3.545,-1.9939,3.0781;4.0217,-.7019,3.2783;4.6717,-.0639,2.2264;4.5106,-2.5255,-.1206;3.3584,-3.6911,1.7587;2.6872,-2.5998,4.1014;3.8404,-.1965,4.2279;5.0137,.9678,2.3462;-.7865,.4749,-4.292;-1.7692,-.4916,-4.4626;-1.4272,-1.6855,-5.0859;-.1439,-1.9204,-5.5699;.8321,-.9513,-5.3782;-1.0261,1.4004,-3.7623;-2.7855,-.3423,-4.0969;-2.4425,-2.7324,-5.2194;.0817,-2.8625,-6.0697;1.8518,-1.1404,-5.7177;2.3578,-1.9101,5.0467;2.3133,-3.7414,3.9294;-2.2254,-3.6355,-5.9987;-3.4414,-2.6436,-4.5333;7.0687,1.1705,-1.478;6.114,1.5566,-2.4633;8.4379,1.5022,-1.6666;8.8541,2.1659,-2.7941;9.1595,1.2083,-.898;9.9119,2.4153,-2.9295;6.5814,2.2245,-3.6295;7.9129,2.5193,-3.7905;5.8653,2.4936,-4.4093;8.2497,3.0279,-4.6986;3.4148,3.1546,-3.3489;2.3066,3.5665,-4.1465;4.2215,4.1669,-2.7554;3.9791,5.4989,-2.9915;5.0435,3.8794,-2.0981;4.6155,6.2554,-2.5229;2.0898,4.9519,-4.384;2.9111,5.9012,-3.8281;1.2442,5.249,-5.012;2.7342,6.9637,-4.016;-4.4834,-2.2133,-.2816;-4.454,-3.0051,-1.0494;-5.0079,-2.5978,.608;-5.1023,-1.3951,-.6965;-2.1862,-1.4304,-1.1393;-2.3249,-.3884,-1.4828;-1.1097,-1.5547,-.9377;-2.43,-2.0814,-1.9925;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412382896</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003061522407 0.000299166839 0.022489466639 0.005337128071</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030680846 -0.000307128 0.000037350 0.000114588 0.000134389 0.000325039 0.000378190 0.000474832 0.000587616 0.000808853 0.000940410 0.001062569 0.001244094 0.001344929 0.001382071 0.001422812 0.001565250 0.001820618 0.001834520 0.001951226 0.002212065 0.002407055 0.002634184 0.002683787 0.002706842 0.003021507 0.003117516 0.003481780 0.003538525 0.003909788 0.004458247 0.004719585 0.004794507 0.005084812 0.006015930 0.006133461 0.006151851 0.006630902 0.006981418 0.007759071 0.008107738 0.008241892 0.009309969 0.009520167 0.010019562 0.010652698 0.010965075 0.011080676 0.011772976 0.012255018 0.012942461 0.013130613 0.014054363 0.014572256 0.015169093 0.015512698 0.015723181 0.016289548 0.016959144 0.017475096 0.018118791 0.018510454 0.019425745 0.019576586 0.020040630 0.020807992 0.021223399 0.021437213 0.022596006 0.023154808 0.025049637 0.026281222 0.026796470 0.027120269 0.027723017 0.029490274 0.029657274 0.031509279 0.033297551 0.033582797 0.033956869 0.035794178 0.036902244 0.037699590 0.039601465 0.040060555 0.040851602 0.042340679 0.044266222 0.045213620 0.045447763 0.047073541 0.047820766 0.049237787 0.050418933 0.050989096 0.051203472 0.051417756 0.052482817 0.052655673 0.052916299 0.053112199 0.054720326 0.054939982 0.055967702 0.056271731 0.056514253 0.056682011 0.057189853 0.059024226 0.060433164 0.060903260 0.061700443 0.062305246 0.063314918 0.064508133 0.065360568 0.065928297 0.066535956 0.068242949 0.069058760 0.070255678 0.072732532 0.074495665 0.074778350 0.076323419 0.078417886 0.084008041 0.086494153 0.087098598 0.087511443 0.088852023 0.090508489 0.091009366 0.093349554 0.094607887 0.095451726 0.096415308 0.097847321 0.098812020 0.099090453 0.100141821 0.100798055 0.102449381 0.103193035 0.103438168 0.104054611 0.104446240 0.106313667 0.106949992 0.107756135 0.109713970 0.110927983 0.112110305 0.112796454 0.114936680 0.116166352 0.116695220 0.118685196 0.120688187 0.121580145 0.123049960 0.124406082 0.125522043 0.126164587 0.126521744 0.127086756 0.132021459 0.135080167 0.135797870 0.142788863 0.143712310 0.147047168 0.147584844 0.149720454 0.152718032 0.154687378 0.156288118 0.156790736 0.161542386 0.161878994 0.173651902 0.174116729 0.180103155 0.184587194 0.186196256 0.189607270 0.190366666 0.194102966 0.194733855 0.198461340 0.200209617 0.205226086 0.206905749 0.207327960 0.210223344 0.215221778 0.216578669 0.217893153 0.219053623 0.220739850 0.225276492 0.226539105 0.232147259 0.235120522 0.235588198 0.235934525 0.244613975 0.256018764 0.257254595 0.263692724 0.269907792 0.280369030 0.283165120 0.286314895 0.291726069 0.296731713 0.304366895 0.305764676 0.307301122 0.314304629 0.316739550 0.317379321 0.322213597 0.329918121 0.332853285 0.351785956 0.352160452 0.355096081 0.355769218 0.360098589 0.362831696 0.364153971 0.384462583 0.386034531 0.392174423 0.410703871 0.425716083 0.430949011 0.462354250 0.468769977 0.478368816 0.483668218 0.484434008 0.487980411 0.491435968 0.509586823 0.515475336 0.535313517 0.568909483 0.575087362 0.592578236 0.593971262 0.606476899 0.608196496 0.644694614 0.647100427 0.649493005 0.674301985 0.678085397 0.685902558 0.691961464 0.693529808 0.700078540 0.704421036 0.717899931 0.741505594 0.751288243 0.759392607 0.769685808 0.773082073 0.778856669 0.810988467 0.815415200 0.819786649 0.821933671 0.823538517 0.831618532 0.834905252 0.836404741 0.842426395 0.845824054 0.847527464 0.849757789 0.859179722 0.865908716 0.866858193 0.874153152 0.885384907 0.886094297 0.889697545 0.899870896 0.901016723 0.904110689 0.923437504 0.927715632 0.935771062 0.937293059 0.966179730 0.976085295 0.986089703 1.001161124 1.019147302 1.028318601 1.041920356 1.050892558 1.057584405 1.068824322 1.086653097 1.088739715 1.104583431 1.107142534 1.112499989 1.124879876 1.135923350 1.137014777 1.144588389 1.174866125 1.179008431 1.181237287 1.186911354 1.191460523 1.196283305 1.224653686 1.228346254 1.275099299 1.302530125 1.319845508 1.328268122 1.333362206 1.336331303 1.336424159 1.342888375 1.343157806 1.345060117 1.359206693 1.378759278 1.382976012 1.385184286 1.415899157 1.420373723 1.436736111 1.551486519 1.681682980 1.776372021</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">240</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3354138" y3="0.05648891" z3="-0.19087873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3804194" y3="0.17078215" z3="0.42315281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64325551" y3="0.44524271" z3="-0.33775913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73050834" y3="1.24028236" z3="-2.26344037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38639233" y3="0.44113183" z3="-1.18526333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73367121" y3="0.84965448" z3="-3.66768364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63909455" y3="1.7522347" z3="-3.14056136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39330701" y3="2.59453213" z3="-4.63183558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56874136" y3="1.25378324" z3="-4.38484549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51650529" y3="2.92989973" z3="-5.19447732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92649099" y3="-0.48052539" z3="-3.44336246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0951186" y3="0.05400572" z3="-1.00438129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39819636" y3="-1.09033269" z3="-2.00330592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92650469" y3="-0.95800256" z3="-1.83285298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09871162" y3="-2.41540367" z3="-1.84590958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14341804" y3="-3.61883588" z3="0.67754192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02020168" y3="-5.23900157" z3="-4.74466836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24729417" y3="-4.98669099" z3="-3.70534383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84252443" y3="-4.30887078" z3="-1.08219067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7776698" y3="-4.57682272" z3="-2.85422399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56192744" y3="-5.08439655" z3="-3.24480297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86038014" y3="-4.74045698" z3="-1.92876328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49195689" y3="-4.25244732" z3="-1.52641859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80893159" y3="-4.48895072" z3="-3.20296155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36051248" y3="-5.3999361" z3="-3.91959622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89546458" y3="-4.78649187" z3="-1.58304111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03153101" y3="-3.86463891" z3="0.24008415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1718294" y3="-3.6544492" z3="0.88602519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05879942" y3="-4.11871107" z3="0.45258887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16591674" y3="-3.52151487" z3="2.3532497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22139275" y3="-3.34314382" z3="5.15164145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36079659" y3="-3.73116029" z3="3.05729131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99868244" y3="-3.22859331" z3="3.07446009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02387818" y3="-3.13980372" z3="4.46328696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38761642" y3="-3.64414601" z3="4.44643654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27581559" y3="-3.97245569" z3="2.50939334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04019362" y3="-3.09099339" z3="2.56934219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09446844" y3="-2.93222421" z3="5.00145576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32444552" y3="-3.81945907" z3="4.9821347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24027909" y3="-3.28209186" z3="6.24340076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41157979" y3="-3.88522152" z3="-0.62328636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17004207" y3="-3.38087947" z3="-1.07648669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52630742" y3="0.24948019" z3="-4.7188091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08471746" y3="-1.72981133" z3="0.03080565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91040363" y3="-0.97953744" z3="1.19296042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85112343" y3="-0.32475677" z3="1.52560083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37814658" y3="0.55085499" z3="1.22336483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46273062" y3="1.45281674" z3="-0.40145999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9765555" y3="-0.70307127" z3="1.39513874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36246269" y3="1.74162376" z3="2.66938017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88396828" y3="-0.97473528" z3="2.09223044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65555153" y3="-0.36254511" z3="3.35171854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22256823" y3="0.76499614" z3="-1.23042268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30847615" y3="2.2457108" z3="-0.39683888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44467401" y3="1.93308391" z3="-0.55948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00987899" y3="-1.0687735" z3="2.43476353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94762807" y3="-0.2380867" z3="1.15404414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85104502" y3="-1.5444772" z3="0.69444942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41546566" y3="1.20149418" z3="3.63135047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57296208" y3="2.33030539" z3="2.66531703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2055534" y3="2.45380565" z3="2.62250515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79074633" y3="-0.81653839" z3="3.86157535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56868005" y3="-0.54155775" z3="3.93479718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48948871" y3="0.72067129" z3="3.23337376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83362346" y3="-0.70043827" z3="0.99096052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41048429" y3="-2.0283537" z3="0.85140892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7590289" y3="-2.67617624" z3="1.8936556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54715394" y3="-1.98302837" z3="3.08168529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0219987" y3="-0.68956527" z3="3.27751644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67360185" y3="-0.05523279" z3="2.22457955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51683525" y3="-2.52573109" z3="-0.1146775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36553851" y3="-3.6858261" z3="1.76983737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68758151" y3="-2.5852755" z3="4.10573829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8368585" y3="-0.17986095" z3="4.22328984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01415408" y3="0.97737442" z3="2.34060685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78890029" y3="0.47247062" z3="-4.28956864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77072017" y3="-0.49400207" z3="-4.46215078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42709897" y3="-1.68700229" z3="-5.08812207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14276225" y3="-1.92051554" z3="-5.56966408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83228806" y3="-0.950928" z3="-5.37342061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03028489" y3="1.39702677" z3="-3.75862441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78795178" y3="-0.34609241" z3="-4.09856828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44149224" y3="-2.73442905" z3="-5.22505951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08417294" y3="-2.86176933" z3="-6.07059925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85266018" y3="-1.13882252" z3="-5.71173579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35585836" y3="-1.8920776" z3="5.04800117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31561263" y3="-3.72789138" z3="3.93799254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22223725" y3="-3.63690835" z3="-6.00427287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44177618" y3="-2.64663408" z3="-4.54083499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0718123" y3="1.16454982" z3="-1.48634786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11448497" y3="1.55274851" z3="-2.46853482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44197572" y3="1.49183492" z3="-1.68031745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85681801" y3="2.15533134" z3="-2.80928125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1651445" y3="1.19358313" z3="-0.91503637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91352891" y3="2.39276096" z3="-2.95143241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57961838" y3="2.21856943" z3="-3.63665913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91285344" y3="2.51235674" z3="-3.80192456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86140414" y3="2.48997107" z3="-4.41383462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24793434" y3="3.01804496" z3="-4.71177399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41283049" y3="3.1556922" z3="-3.3452481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30164362" y3="3.56748003" z3="-4.138748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22181589" y3="4.16704411" z3="-2.75450247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97657973" y3="5.49978079" z3="-2.98676716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04679541" y3="3.87916969" z3="-2.10101718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61497405" y3="6.25538537" z3="-2.52086351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08291439" y3="4.95271852" z3="-4.37367281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90484938" y3="5.90206811" z3="-3.81860128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23510538" y3="5.24951294" z3="-4.9988822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72509915" y3="6.96517001" z3="-4.00300806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48202834" y3="-2.21068197" z3="-0.28742594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45103733" y3="-3.00180068" z3="-1.05570071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00883944" y3="-2.59566426" z3="0.60056249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0989939" y3="-1.39165536" z3="-0.70323895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18355635" y3="-1.42887916" z3="-1.14051314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32378407" y3="-0.38835628" z3="-1.4863276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10576822" y3="-1.55248907" z3="-0.93796552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42345402" y3="-2.08222832" z3="-1.99246011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3354,.0565,-.1909;7.3804,.1708,.4232;6.6433,.4452,-.3378;4.7305,1.2403,-2.2634;4.3864,.4411,-1.1853;2.7337,.8497,-3.6677;3.6391,1.7522,-3.1406;1.3933,2.5945,-4.6318;1.5687,1.2538,-4.3848;.5165,2.9299,-5.1945;2.9265,-.4805,-3.4434;3.0951,.054,-1.0044;2.3982,-1.0903,-2.0033;.9265,-.958,-1.8329;3.0987,-2.4154,-1.8459;-.1434,-3.6188,.6775;-.0202,-5.239,-4.7447;-.2473,-4.9867,-3.7053;-.8425,-4.3089,-1.0822;.7777,-4.5768,-2.8542;-1.5619,-5.0844,-3.2448;-1.8604,-4.7405,-1.9288;.492,-4.2524,-1.5264;1.8089,-4.489,-3.203;-2.3605,-5.3999,-3.9196;-2.8955,-4.7865,-1.583;-1.0315,-3.8646,.2401;-2.1718,-3.6544,.886;-3.0588,-4.1187,.4526;-2.1659,-3.5215,2.3532;-2.2214,-3.3431,5.1516;-3.3608,-3.7312,3.0573;-.9987,-3.2286,3.0745;-1.0239,-3.1398,4.4633;-3.3876,-3.6441,4.4464;-4.2758,-3.9725,2.5094;-.0402,-3.091,2.5693;-.0945,-2.9322,5.0015;-4.3244,-3.8195,4.9821;-2.2403,-3.2821,6.2434;1.4116,-3.8852,-.6233;2.17,-3.3809,-1.0765;.5263,.2495,-4.7188;-3.0847,-1.7298,.0308;-2.9104,-.9795,1.193;-1.8511,-.3248,1.5256;-.3781,.5509,1.2234;-.4627,1.4528,-.4015;.9766,-.7031,1.3951;-.3625,1.7416,2.6694;-3.884,-.9747,2.0922;-3.6556,-.3625,3.3517;-.2226,.765,-1.2304;.3085,2.2457,-.3968;-1.4447,1.9331,-.5595;1.0099,-1.0688,2.4348;1.9476,-.2381,1.154;.851,-1.5445,.6944;-.4155,1.2015,3.6314;.573,2.3303,2.6653;-1.2056,2.4538,2.6225;-2.7907,-.8165,3.8616;-4.5687,-.5416,3.9348;-3.4895,.7207,3.2334;4.8336,-.7004,.991;4.4105,-2.0284,.8514;3.759,-2.6762,1.8937;3.5472,-1.983,3.0817;4.022,-.6896,3.2775;4.6736,-.0552,2.2246;4.5168,-2.5257,-.1147;3.3655,-3.6858,1.7698;2.6876,-2.5853,4.1057;3.8369,-.1799,4.2233;5.0142,.9774,2.3406;-.7889,.4725,-4.2896;-1.7707,-.494,-4.4622;-1.4271,-1.687,-5.0881;-.1428,-1.9205,-5.5697;.8323,-.9509,-5.3734;-1.0303,1.397,-3.7586;-2.788,-.3461,-4.0986;-2.4415,-2.7344,-5.2251;.0842,-2.8618,-6.0706;1.8527,-1.1388,-5.7117;2.3559,-1.8921,5.048;2.3156,-3.7279,3.938;-2.2222,-3.6369,-6.0043;-3.4418,-2.6466,-4.5408;7.0718,1.1645,-1.4863;6.1145,1.5527,-2.4685;8.442,1.4918,-1.6803;8.8568,2.1553,-2.8093;9.1651,1.1936,-.915;9.9135,2.3928,-2.9514;6.5796,2.2186,-3.6367;7.9129,2.5124,-3.8019;5.8614,2.49,-4.4138;8.2479,3.018,-4.7118;3.4128,3.1557,-3.3452;2.3016,3.5675,-4.1387;4.2218,4.167,-2.7545;3.9766,5.4998,-2.9868;5.0468,3.8792,-2.101;4.615,6.2554,-2.5209;2.0829,4.9527,-4.3737;2.9048,5.9021,-3.8186;1.2351,5.2495,-4.9989;2.7251,6.9652,-4.003;-4.482,-2.2107,-.2874;-4.451,-3.0018,-1.0557;-5.0088,-2.5957,.6006;-5.099,-1.3917,-.7032;-2.1836,-1.4289,-1.1405;-2.3238,-.3884,-1.4863;-1.1058,-1.5525,-.938;-2.4235,-2.0822,-1.9925;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421550718</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002485198557 0.000274195449 0.019902389751 0.005340132508</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030681539 -0.000209063 0.000027813 0.000118856 0.000133721 0.000325129 0.000379168 0.000473821 0.000587556 0.000808483 0.000940637 0.001062641 0.001243355 0.001344941 0.001382565 0.001423454 0.001564935 0.001820529 0.001835061 0.001951199 0.002215404 0.002407120 0.002635439 0.002683659 0.002707313 0.003021635 0.003117730 0.003482082 0.003538565 0.003910963 0.004458186 0.004719739 0.004797435 0.005085471 0.006016371 0.006134190 0.006159326 0.006632092 0.006981828 0.007759024 0.008107740 0.008241961 0.009309941 0.009521445 0.010023509 0.010655397 0.010964985 0.011080953 0.011775493 0.012258876 0.012946397 0.013131141 0.014056628 0.014572684 0.015172770 0.015514682 0.015726310 0.016302604 0.016967585 0.017476071 0.018119136 0.018510651 0.019426121 0.019579521 0.020041739 0.020809105 0.021223360 0.021437316 0.022595934 0.023154858 0.025049610 0.026294167 0.026796465 0.027184180 0.027727413 0.029492065 0.029657426 0.031512586 0.033297680 0.033584584 0.033957181 0.035794264 0.036903030 0.037704562 0.039602741 0.040060753 0.040851977 0.042341146 0.044266180 0.045214733 0.045448546 0.047075321 0.047821180 0.049238396 0.050418982 0.050989445 0.051207937 0.051419787 0.052483138 0.052659159 0.052916283 0.053112220 0.054721374 0.054941118 0.055971919 0.056272406 0.056516639 0.056683296 0.057189914 0.059031201 0.060438288 0.060904822 0.061701071 0.062307614 0.063316956 0.064509088 0.065360486 0.065934787 0.066537387 0.068263133 0.069058885 0.070255838 0.072733963 0.074495932 0.074778357 0.076325437 0.078426816 0.084024233 0.086508414 0.087098791 0.087523923 0.088867117 0.090525810 0.091015242 0.093406219 0.094610701 0.095452051 0.096416370 0.097847411 0.098812088 0.099097096 0.100142270 0.100797957 0.102449831 0.103194850 0.103442959 0.104054660 0.104454875 0.106313506 0.106950231 0.107805324 0.109715834 0.110930811 0.112142415 0.112816963 0.114945145 0.116167018 0.116697583 0.118685934 0.120697972 0.121596146 0.123064789 0.124407685 0.125523197 0.126177552 0.126556922 0.127089992 0.132026888 0.135080635 0.135800467 0.142789289 0.143720320 0.147047281 0.147585834 0.149723570 0.152729455 0.154687424 0.156295211 0.156795698 0.161552627 0.161879806 0.173680611 0.174128378 0.180153686 0.184625156 0.186201805 0.189608136 0.190368318 0.194104031 0.194741911 0.198462750 0.200213385 0.205226041 0.206909723 0.207330245 0.210225733 0.215236012 0.216582675 0.217893585 0.219071527 0.220748871 0.225276474 0.226547087 0.232147724 0.235120531 0.235593002 0.235941394 0.244614276 0.256019518 0.257254730 0.263697656 0.269911434 0.280370007 0.283169446 0.286315276 0.291746227 0.296739768 0.304368705 0.305768173 0.307301947 0.314305065 0.316743897 0.317379903 0.322216482 0.329925090 0.332854298 0.351786545 0.352162003 0.355096767 0.355772717 0.360098593 0.362833114 0.364154019 0.384462497 0.386036384 0.392174794 0.410708878 0.425716154 0.430951317 0.462355822 0.468793139 0.478369116 0.483671673 0.484439509 0.487980707 0.491438023 0.509588571 0.515490132 0.535315006 0.568927994 0.575143060 0.592587720 0.593976068 0.606504886 0.608196498 0.644695143 0.647101720 0.649493263 0.674302729 0.678089367 0.685909274 0.691972219 0.693530333 0.700078798 0.704423760 0.717939746 0.741545755 0.751300384 0.759397795 0.769687312 0.773137426 0.778874841 0.810989178 0.815436315 0.819792702 0.822020324 0.823538498 0.831623444 0.834908249 0.836408409 0.842427345 0.845830556 0.847527750 0.849757940 0.859184545 0.865913870 0.866910851 0.874166381 0.885452396 0.886095520 0.889697638 0.899886103 0.901020556 0.904113122 0.923437672 0.927739681 0.935779946 0.937345422 0.966181332 0.976085306 0.986090584 1.001162543 1.019182781 1.028323958 1.041929232 1.050901776 1.057584451 1.068825709 1.086659824 1.088741507 1.104594645 1.107206393 1.112502247 1.124884849 1.135958569 1.137492172 1.144609937 1.174876452 1.179008749 1.181243209 1.186915186 1.191463977 1.196314444 1.224655301 1.228346421 1.275104413 1.302559176 1.319875262 1.328277144 1.333379278 1.336340055 1.336447663 1.342888737 1.343169729 1.345066425 1.359209031 1.378765838 1.382981700 1.385223668 1.415899148 1.420376267 1.436739562 1.551486804 1.681734763 1.776383723</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">241</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34016671" y3="0.05648233" z3="-0.19242301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38734178" y3="0.16519984" z3="0.41437151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64844076" y3="0.44130128" z3="-0.34411734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73127346" y3="1.23932417" z3="-2.26417026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38903896" y3="0.4415645" z3="-1.18464546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73132346" y3="0.84945322" z3="-3.66332102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63807514" y3="1.75137635" z3="-3.13886827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38751009" y3="2.59387432" z3="-4.62246363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56462162" y3="1.25361032" z3="-4.37743092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50914193" y3="2.92915323" z3="-5.18273611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92463941" y3="-0.48047514" z3="-3.43918795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09790616" y3="0.05550204" z3="-1.00093614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40000762" y3="-1.08996793" z3="-1.99775437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92852435" y3="-0.95837071" z3="-1.82529817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10184107" y3="-2.41433557" z3="-1.84042319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14390817" y3="-3.61945316" z3="0.67718488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0101545" y3="-5.23881098" z3="-4.74486012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23981802" y3="-4.98600564" z3="-3.7062504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84038886" y3="-4.30737039" z3="-1.08455278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7827832" y3="-4.57565289" z3="-2.85325541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55520988" y3="-5.08338062" z3="-3.24851254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85627023" y3="-4.73881349" z3="-1.93314247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49478556" y3="-4.25129227" z3="-1.5259594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81561695" y3="-4.49011731" z3="-3.20012595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35326511" y3="-5.39756823" z3="-3.92504566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89299266" y3="-4.78212877" z3="-1.58958247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03168569" y3="-3.86378385" z3="0.23759882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17280375" y3="-3.65402901" z3="0.8821246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05951972" y3="-4.11726518" z3="0.44687774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16887532" y3="-3.52169079" z3="2.34940915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22926365" y3="-3.34194767" z3="5.14752542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36491147" y3="-3.73096125" z3="3.05156931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00285924" y3="-3.22866011" z3="3.07239805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03017358" y3="-3.1395933" z3="4.46115983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39422461" y3="-3.64322946" z3="4.4405526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27907305" y3="-3.97205923" z3="2.50218197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04332021" y3="-3.09147195" z3="2.56872296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10190205" y3="-2.93122277" z3="5.00050635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33262145" y3="-3.81696663" z3="4.97476396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25045536" y3="-3.28003991" z3="6.23911044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4135414" y3="-3.88582569" z3="-0.62079076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17322056" y3="-3.38136481" z3="-1.07226425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52353413" y3="0.24841807" z3="-4.71303224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08384864" y3="-1.72778241" z3="0.02674619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91020513" y3="-0.97879214" z3="1.18986446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85040098" y3="-0.32637418" z3="1.52516912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37659453" y3="0.54912436" z3="1.22658533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46090336" y3="1.45443335" z3="-0.39637081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97750453" y3="-0.70559797" z3="1.39709916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36084121" y3="1.73567083" z3="2.67602633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88541715" y3="-0.97299759" z3="2.08753976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65861602" y3="-0.36113082" z3="3.34738921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21791614" y3="0.76873316" z3="-1.22606795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30761721" y3="2.2498116" z3="-0.38932242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44420889" y3="1.93171255" z3="-0.55478551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0097686" y3="-1.07229855" z3="2.4365221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94931076" y3="-0.24104987" z3="1.15700208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85201778" y3="-1.54619349" z3="0.69564945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41436631" y3="1.19232555" z3="3.6360233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57546744" y3="2.32306536" z3="2.67426403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20307367" y3="2.44884135" z3="2.63140333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79580404" y3="-0.81663905" z3="3.85917313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57340315" y3="-0.53822551" z3="3.92856112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4899889" y3="0.72186387" z3="3.22942032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83879274" y3="-0.6973428" z3="0.99162915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4171974" y3="-2.02608565" z3="0.85636201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76423385" y3="-2.67063967" z3="1.89974602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54984857" y3="-1.9734069" z3="3.08511601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02359623" y3="-0.67891409" z3="3.27711543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67627882" y3="-0.04791825" z3="2.2227378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52709652" y3="-2.5273049" z3="-0.10633347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37131644" y3="-3.68099583" z3="1.77865106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68699746" y3="-2.57199746" z3="4.10862422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83754807" y3="-0.16614972" z3="4.2218398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01602852" y3="0.98535613" z3="2.33569158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79261695" y3="0.46936236" z3="-4.28570072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77316761" y3="-0.49810996" z3="-4.46210871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42708887" y3="-1.68980499" z3="-5.08753979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14154984" y3="-1.9211839" z3="-5.56788345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83196981" y3="-0.95089897" z3="-5.37020814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0358153" y3="1.39286805" z3="-3.75414748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7910715" y3="-0.35176751" z3="-4.09963112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44000098" y3="-2.73812606" z3="-5.22671284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08741181" y3="-2.86157394" z3="-6.06929665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85309171" y3="-1.13716453" z3="-5.70711252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35133649" y3="-1.87509341" z3="5.04623155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31515602" y3="-3.71549859" z3="3.9436092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21798692" y3="-3.6399316" z3="-6.00626345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44175951" y3="-2.65184552" z3="-4.54458474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07499593" y3="1.15899356" z3="-1.49470784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11543966" y3="1.55068664" z3="-2.47315917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4451788" y3="1.48072858" z3="-1.6947027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85727369" y3="2.1405568" z3="-2.82613819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17089596" y3="1.18157832" z3="-0.93197913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91561919" y3="2.37988916" z3="-2.9713348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57792428" y3="2.21606548" z3="-3.64282186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91048154" y3="2.50116215" z3="-3.81475501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85731887" y3="2.49024183" z3="-4.41681909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24354194" y3="3.00640302" z3="-4.7258772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41022129" y3="3.15504371" z3="-3.34088411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29569871" y3="3.56719842" z3="-4.12945564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2200907" y3="4.16659795" z3="-2.75071594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97263951" y3="5.49900742" z3="-2.97967095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04824841" y3="3.87826194" z3="-2.10135745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61083899" y3="6.2554864" z3="-2.51309103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07337675" y3="4.95326727" z3="-4.35918703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89658033" y3="5.90198892" z3="-3.80567124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22231102" y3="5.25071294" z3="-4.97970859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71528216" y3="6.96475222" z3="-3.98742707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48129899" y3="-2.20698598" z3="-0.29363942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45042298" y3="-2.99725833" z3="-1.06300021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00930834" y3="-2.59251412" z3="0.59334923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09743994" y3="-1.38703387" z3="-0.70909584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17996378" y3="-1.42782952" z3="-1.14250994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31937897" y3="-0.38672801" z3="-1.48904109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10391259" y3="-1.54952855" z3="-0.93622388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41814775" y3="-2.08181552" z3="-1.9950438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3402,.0565,-.1924;7.3873,.1652,.4144;6.6484,.4413,-.3441;4.7313,1.2393,-2.2642;4.389,.4416,-1.1846;2.7313,.8495,-3.6633;3.6381,1.7514,-3.1389;1.3875,2.5939,-4.6225;1.5646,1.2536,-4.3774;.5091,2.9292,-5.1827;2.9246,-.4805,-3.4392;3.0979,.0555,-1.0009;2.4,-1.09,-1.9978;.9285,-.9584,-1.8253;3.1018,-2.4143,-1.8404;-.1439,-3.6195,.6772;-.0102,-5.2388,-4.7449;-.2398,-4.986,-3.7063;-.8404,-4.3074,-1.0846;.7828,-4.5757,-2.8533;-1.5552,-5.0834,-3.2485;-1.8563,-4.7388,-1.9331;.4948,-4.2513,-1.526;1.8156,-4.4901,-3.2001;-2.3533,-5.3976,-3.925;-2.893,-4.7821,-1.5896;-1.0317,-3.8638,.2376;-2.1728,-3.654,.8821;-3.0595,-4.1173,.4469;-2.1689,-3.5217,2.3494;-2.2293,-3.3419,5.1475;-3.3649,-3.731,3.0516;-1.0029,-3.2287,3.0724;-1.0302,-3.1396,4.4612;-3.3942,-3.6432,4.4406;-4.2791,-3.9721,2.5022;-.0433,-3.0915,2.5687;-.1019,-2.9312,5.0005;-4.3326,-3.817,4.9748;-2.2505,-3.28,6.2391;1.4135,-3.8858,-.6208;2.1732,-3.3814,-1.0723;.5235,.2484,-4.713;-3.0838,-1.7278,.0267;-2.9102,-.9788,1.1899;-1.8504,-.3264,1.5252;-.3766,.5491,1.2266;-.4609,1.4544,-.3964;.9775,-.7056,1.3971;-.3608,1.7357,2.676;-3.8854,-.973,2.0875;-3.6586,-.3611,3.3474;-.2179,.7687,-1.2261;.3076,2.2498,-.3893;-1.4442,1.9317,-.5548;1.0098,-1.0723,2.4365;1.9493,-.241,1.157;.852,-1.5462,.6956;-.4144,1.1923,3.636;.5755,2.3231,2.6743;-1.2031,2.4488,2.6314;-2.7958,-.8166,3.8592;-4.5734,-.5382,3.9286;-3.49,.7219,3.2294;4.8388,-.6973,.9916;4.4172,-2.0261,.8564;3.7642,-2.6706,1.8997;3.5498,-1.9734,3.0851;4.0236,-.6789,3.2771;4.6763,-.0479,2.2227;4.5271,-2.5273,-.1063;3.3713,-3.681,1.7787;2.687,-2.572,4.1086;3.8375,-.1661,4.2218;5.016,.9854,2.3357;-.7926,.4694,-4.2857;-1.7732,-.4981,-4.4621;-1.4271,-1.6898,-5.0875;-.1415,-1.9212,-5.5679;.832,-.9509,-5.3702;-1.0358,1.3929,-3.7541;-2.7911,-.3518,-4.0996;-2.44,-2.7381,-5.2267;.0874,-2.8616,-6.0693;1.8531,-1.1372,-5.7071;2.3513,-1.8751,5.0462;2.3152,-3.7155,3.9436;-2.218,-3.6399,-6.0063;-3.4418,-2.6518,-4.5446;7.075,1.159,-1.4947;6.1154,1.5507,-2.4732;8.4452,1.4807,-1.6947;8.8573,2.1406,-2.8261;9.1709,1.1816,-.932;9.9156,2.3799,-2.9713;6.5779,2.2161,-3.6428;7.9105,2.5012,-3.8148;5.8573,2.4902,-4.4168;8.2435,3.0064,-4.7259;3.4102,3.155,-3.3409;2.2957,3.5672,-4.1295;4.2201,4.1666,-2.7507;3.9726,5.499,-2.9797;5.0482,3.8783,-2.1014;4.6108,6.2555,-2.5131;2.0734,4.9533,-4.3592;2.8966,5.902,-3.8057;1.2223,5.2507,-4.9797;2.7153,6.9648,-3.9874;-4.4813,-2.207,-.2936;-4.4504,-2.9973,-1.063;-5.0093,-2.5925,.5933;-5.0974,-1.387,-.7091;-2.18,-1.4278,-1.1425;-2.3194,-.3867,-1.489;-1.1039,-1.5495,-.9362;-2.4181,-2.0818,-1.995;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423375155</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002146022123 0.000254021185 0.019580419214 0.005335004739</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030682701 -0.000348279 0.000074778 0.000095918 0.000145727 0.000335054 0.000357004 0.000443339 0.000584605 0.000812678 0.000943274 0.001064353 0.001232950 0.001346005 0.001377775 0.001421438 0.001565777 0.001819001 0.001823045 0.001951009 0.002214135 0.002360220 0.002608982 0.002684280 0.002691052 0.003004786 0.003118040 0.003451268 0.003522219 0.003909144 0.004449221 0.004711567 0.004799724 0.005085886 0.006011330 0.006108786 0.006166998 0.006629972 0.006972732 0.007752955 0.008105273 0.008230708 0.009309555 0.009521686 0.010026003 0.010663700 0.010909336 0.011042076 0.011757379 0.012264085 0.012948080 0.013120717 0.014057873 0.014575548 0.015174830 0.015515278 0.015732018 0.016304696 0.016985875 0.017468625 0.018119225 0.018508842 0.019425641 0.019583051 0.020043228 0.020808979 0.021222541 0.021434995 0.022594667 0.023154850 0.025049084 0.026296095 0.026796832 0.027266368 0.027725579 0.029493253 0.029658960 0.031513547 0.033296439 0.033585109 0.033957539 0.035790729 0.036903664 0.037706781 0.039592432 0.040060273 0.040851583 0.042342213 0.044258185 0.045199058 0.045446539 0.047078036 0.047824352 0.049239135 0.050415826 0.050989022 0.051210130 0.051422127 0.052483257 0.052665714 0.052916261 0.053111863 0.054721917 0.054941875 0.055977486 0.056272311 0.056519009 0.056683402 0.057189151 0.059037831 0.060440884 0.060906850 0.061702706 0.062309385 0.063315469 0.064510452 0.065356494 0.065946928 0.066537861 0.068276296 0.069059081 0.070255863 0.072734839 0.074495821 0.074780086 0.076326145 0.078432151 0.084035676 0.086517520 0.087100174 0.087532295 0.088874723 0.090534431 0.091028385 0.093461336 0.094614528 0.095446737 0.096417712 0.097847140 0.098808479 0.099110524 0.100144639 0.100799594 0.102450003 0.103199618 0.103450640 0.104054849 0.104457973 0.106310593 0.106950402 0.107842188 0.109720372 0.110932252 0.112166296 0.112826241 0.114957815 0.116167014 0.116694383 0.118683442 0.120711807 0.121599622 0.123080072 0.124407970 0.125525562 0.126191503 0.126584866 0.127096628 0.132029690 0.135078619 0.135802868 0.142787444 0.143728458 0.147047073 0.147587611 0.149724431 0.152742166 0.154670645 0.156300138 0.156787986 0.161516595 0.161881719 0.173693414 0.174138570 0.180215418 0.184657981 0.186207676 0.189607087 0.190373522 0.194107006 0.194744977 0.198465822 0.200220012 0.205225178 0.206913404 0.207334858 0.210226586 0.215242101 0.216586271 0.217895042 0.219081294 0.220755615 0.225275177 0.226554338 0.232149330 0.235115284 0.235594708 0.235949753 0.244614829 0.256019770 0.257254954 0.263701418 0.269914479 0.280370868 0.283180912 0.286315764 0.291765320 0.296747914 0.304371832 0.305771851 0.307300658 0.314304727 0.316746388 0.317380544 0.322218624 0.329924622 0.332856483 0.351782807 0.352163325 0.355096227 0.355781610 0.360085893 0.362835057 0.364158996 0.384455840 0.386015021 0.392173997 0.410713753 0.425715059 0.430952637 0.462360366 0.468812215 0.478368226 0.483679128 0.484439569 0.487981534 0.491434187 0.509590388 0.515504758 0.535316061 0.568932272 0.575168804 0.592582422 0.593979245 0.606543984 0.608195932 0.644692399 0.647099483 0.649499459 0.674295338 0.678088284 0.685914749 0.691980018 0.693493502 0.700065201 0.704425550 0.717963070 0.741582272 0.751311379 0.759399916 0.769684874 0.773166348 0.778889446 0.810987447 0.815463454 0.819792992 0.822096525 0.823538495 0.831630087 0.834911227 0.836408651 0.842422563 0.845835020 0.847529151 0.849759100 0.859193607 0.865916324 0.866947689 0.874176953 0.885515281 0.886093389 0.889691668 0.899888241 0.901014503 0.904113364 0.923438017 0.927747745 0.935797020 0.937375700 0.966180224 0.976086324 0.986090827 1.001164444 1.019222137 1.028327939 1.041942179 1.050910860 1.057583423 1.068825306 1.086666476 1.088740215 1.104601351 1.107276332 1.112503695 1.124887604 1.135971282 1.137835109 1.144620189 1.174900936 1.179010265 1.181242692 1.186918320 1.191464443 1.196338973 1.224652205 1.228346646 1.275062809 1.302585955 1.319899046 1.328277838 1.333355096 1.336338555 1.336467267 1.342888777 1.343185647 1.345071767 1.359204014 1.378772186 1.382980881 1.385236881 1.415887139 1.420375231 1.436739212 1.551487124 1.681750058 1.776377718</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">242</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34277543" y3="0.05677849" z3="-0.19345671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39156897" y3="0.16470169" z3="0.40924808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65118761" y3="0.44117106" z3="-0.34772148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73072821" y3="1.2406317" z3="-2.26372703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39015313" y3="0.44259519" z3="-1.18380871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73025293" y3="0.84835496" z3="-3.66121417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63562413" y3="1.75217559" z3="-3.13636733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38068875" y3="2.59236745" z3="-4.61434694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56177581" y3="1.25106451" z3="-4.3732731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50065518" y3="2.92693223" z3="-5.17241672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92647902" y3="-0.48150259" z3="-3.43718802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09923463" y3="0.05636705" z3="-0.99869791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40129986" y3="-1.08962368" z3="-1.99513003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92972665" y3="-0.9571421" z3="-1.82355466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10262827" y3="-2.41397057" z3="-1.83595602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14681373" y3="-3.61602391" z3="0.67713628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00345373" y3="-5.24169105" z3="-4.74248292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2346727" y3="-4.98756904" z3="-3.70449871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83990523" y3="-4.30619801" z3="-1.08461912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78725512" y3="-4.57751409" z3="-2.84983888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55127999" y3="-5.08350385" z3="-3.24909619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85488607" y3="-4.73756399" z3="-1.93479599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49641971" y3="-4.25149148" z3="-1.52359663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82002854" y3="-4.490963" z3="-3.19455149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34673469" y3="-5.40029099" z3="-3.92641557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89145103" y3="-4.78228097" z3="-1.59324185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03342377" y3="-3.86150514" z3="0.23680959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17541901" y3="-3.65063539" z3="0.87953505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0618245" y3="-4.11276816" z3="0.44281664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17334827" y3="-3.5187164" z3="2.34689922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23670999" y3="-3.3381702" z3="5.14508223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37103513" y3="-3.72406155" z3="3.04748774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00712926" y3="-3.22985759" z3="3.07160841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03627238" y3="-3.1395582" z3="4.46023041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40164639" y3="-3.63621449" z3="4.43652764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28520426" y3="-3.96257116" z3="2.49700442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04613383" y3="-3.09673808" z3="2.56948862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10784666" y3="-2.9334671" z3="5.00038264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34056421" y3="-3.80820256" z3="4.96942032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25911704" y3="-3.275791" z3="6.23669567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41261512" y3="-3.88441433" z3="-0.61723596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17236544" y3="-3.37977155" z3="-1.06769693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52272307" y3="0.24436927" z3="-4.71038123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08284041" y3="-1.72238369" z3="0.02479878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90943676" y3="-0.97389342" z3="1.18825264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84851118" y3="-0.3239644" z3="1.52532999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37031104" y3="0.54483241" z3="1.22945162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45233252" y3="1.45645848" z3="-0.39001231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97831735" y3="-0.71641466" z3="1.3945729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.346499" y3="1.72533524" z3="2.68395462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88606975" y3="-0.96587978" z3="2.08420138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65985011" y3="-0.35459401" z3="3.34446594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21488068" y3="0.77212159" z3="-1.22262818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32111928" y3="2.24732362" z3="-0.38171537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43334978" y3="1.93979323" z3="-0.5448806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00993768" y3="-1.08600427" z3="2.43279581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9505185" y3="-0.25334025" z3="1.1555987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84979628" y3="-1.55407059" z3="0.68999185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.404081" y3="1.17778608" z3="3.64150773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59409567" y3="2.30586679" z3="2.68499296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18349325" y3="2.445025" z3="2.64268576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79890199" y3="-0.81221657" z3="3.85768172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57594339" y3="-0.52966917" z3="3.92394941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48878427" y3="0.72792084" z3="3.22666715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84231842" y3="-0.69620717" z3="0.99163306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42491583" y3="-2.02653556" z3="0.85870545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77100844" y3="-2.6701285" z3="1.90215257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55076988" y3="-1.9701922" z3="3.08464128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02037302" y3="-0.67388047" z3="3.27447685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67464147" y3="-0.04398329" z3="2.22049254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53669799" y3="-2.52926688" z3="-0.10390455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38100047" y3="-3.68172551" z3="1.78278869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68553823" y3="-2.5677938" z3="4.10683064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82869288" y3="-0.15854171" z3="4.21593001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01068974" y3="0.99066441" z3="2.33129242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79430164" y3="0.46317532" z3="-4.28515476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77322537" y3="-0.50518741" z3="-4.46413822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42454554" y3="-1.69594427" z3="-5.09122838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13806256" y3="-1.9254056" z3="-5.56870761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83382617" y3="-0.95382347" z3="-5.36728485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03987307" y3="1.38569118" z3="-3.75262469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79204734" y3="-0.36053638" z3="-4.10389165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43599323" y3="-2.7455189" z3="-5.23336672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09296009" y3="-2.86497841" z3="-6.07101188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85579309" y3="-1.13830278" z3="-5.70244041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.343625" y3="-1.86845839" z3="5.04086081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31911967" y3="-3.71306074" z3="3.94525086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21076688" y3="-3.64806229" z3="-6.01085151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44000052" y3="-2.65931101" z3="-4.55424631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07581377" y3="1.15837275" z3="-1.49927099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11415324" y3="1.55038019" z3="-2.47574056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44605068" y3="1.47913543" z3="-1.70236417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85652285" y3="2.14034667" z3="-2.83423582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1729844" y3="1.17746602" z3="-0.94198474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91360033" y3="2.37277081" z3="-2.98330444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57435281" y3="2.21526237" z3="-3.64625114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90776399" y3="2.50257129" z3="-3.82038521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85215742" y3="2.4901373" z3="-4.41854621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23922427" y3="3.00719244" z3="-4.73221061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40510437" y3="3.155428" z3="-3.33656584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28791809" y3="3.56639263" z3="-4.1220457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21525467" y3="4.16702727" z3="-2.74777539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96383113" y3="5.4998352" z3="-2.97283718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04611814" y3="3.8789212" z3="-2.10176433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60331901" y3="6.25541437" z3="-2.50896392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06285228" y3="4.9516632" z3="-4.34966707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88460001" y3="5.90181458" z3="-3.79515058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20979494" y3="5.24831613" z3="-4.96778399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69926243" y3="6.96512219" z3="-3.97309794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48068955" y3="-2.19863497" z3="-0.29788903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4499153" y3="-2.98946182" z3="-1.06649938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0114126" y3="-2.58233077" z3="0.58818574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09391261" y3="-1.37739405" z3="-0.71512306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17790705" y3="-1.42334887" z3="-1.1439375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31613428" y3="-0.38309035" z3="-1.49130206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1009473" y3="-1.54773386" z3="-0.93833083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41606442" y3="-2.07736446" z3="-1.99612607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.0568,-.1935;7.3916,.1647,.4092;6.6512,.4412,-.3477;4.7307,1.2406,-2.2637;4.3902,.4426,-1.1838;2.7303,.8484,-3.6612;3.6356,1.7522,-3.1364;1.3807,2.5924,-4.6143;1.5618,1.2511,-4.3733;.5007,2.9269,-5.1724;2.9265,-.4815,-3.4372;3.0992,.0564,-.9987;2.4013,-1.0896,-1.9951;.9297,-.9571,-1.8236;3.1026,-2.414,-1.836;-.1468,-3.616,.6771;-.0035,-5.2417,-4.7425;-.2347,-4.9876,-3.7045;-.8399,-4.3062,-1.0846;.7873,-4.5775,-2.8498;-1.5513,-5.0835,-3.2491;-1.8549,-4.7376,-1.9348;.4964,-4.2515,-1.5236;1.82,-4.491,-3.1946;-2.3467,-5.4003,-3.9264;-2.8915,-4.7823,-1.5932;-1.0334,-3.8615,.2368;-2.1754,-3.6506,.8795;-3.0618,-4.1128,.4428;-2.1733,-3.5187,2.3469;-2.2367,-3.3382,5.1451;-3.371,-3.7241,3.0475;-1.0071,-3.2299,3.0716;-1.0363,-3.1396,4.4602;-3.4016,-3.6362,4.4365;-4.2852,-3.9626,2.497;-.0461,-3.0967,2.5695;-.1078,-2.9335,5.0004;-4.3406,-3.8082,4.9694;-2.2591,-3.2758,6.2367;1.4126,-3.8844,-.6172;2.1724,-3.3798,-1.0677;.5227,.2444,-4.7104;-3.0828,-1.7224,.0248;-2.9094,-.9739,1.1883;-1.8485,-.324,1.5253;-.3703,.5448,1.2295;-.4523,1.4565,-.39;.9783,-.7164,1.3946;-.3465,1.7253,2.684;-3.8861,-.9659,2.0842;-3.6599,-.3546,3.3445;-.2149,.7721,-1.2226;.3211,2.2473,-.3817;-1.4333,1.9398,-.5449;1.0099,-1.086,2.4328;1.9505,-.2533,1.1556;.8498,-1.5541,.69;-.4041,1.1778,3.6415;.5941,2.3059,2.685;-1.1835,2.445,2.6427;-2.7989,-.8122,3.8577;-4.5759,-.5297,3.9239;-3.4888,.7279,3.2267;4.8423,-.6962,.9916;4.4249,-2.0265,.8587;3.771,-2.6701,1.9022;3.5508,-1.9702,3.0846;4.0204,-.6739,3.2745;4.6746,-.044,2.2205;4.5367,-2.5293,-.1039;3.381,-3.6817,1.7828;2.6855,-2.5678,4.1068;3.8287,-.1585,4.2159;5.0107,.9907,2.3313;-.7943,.4632,-4.2852;-1.7732,-.5052,-4.4641;-1.4245,-1.6959,-5.0912;-.1381,-1.9254,-5.5687;.8338,-.9538,-5.3673;-1.0399,1.3857,-3.7526;-2.792,-.3605,-4.1039;-2.436,-2.7455,-5.2334;.093,-2.865,-6.071;1.8558,-1.1383,-5.7024;2.3436,-1.8685,5.0409;2.3191,-3.7131,3.9453;-2.2108,-3.6481,-6.0109;-3.44,-2.6593,-4.5542;7.0758,1.1584,-1.4993;6.1142,1.5504,-2.4757;8.4461,1.4791,-1.7024;8.8565,2.1403,-2.8342;9.173,1.1775,-.942;9.9136,2.3728,-2.9833;6.5744,2.2153,-3.6463;7.9078,2.5026,-3.8204;5.8522,2.4901,-4.4185;8.2392,3.0072,-4.7322;3.4051,3.1554,-3.3366;2.2879,3.5664,-4.122;4.2153,4.167,-2.7478;3.9638,5.4998,-2.9728;5.0461,3.8789,-2.1018;4.6033,6.2554,-2.509;2.0629,4.9517,-4.3497;2.8846,5.9018,-3.7952;1.2098,5.2483,-4.9678;2.6993,6.9651,-3.9731;-4.4807,-2.1986,-.2979;-4.4499,-2.9895,-1.0665;-5.0114,-2.5823,.5882;-5.0939,-1.3774,-.7151;-2.1779,-1.4233,-1.1439;-2.3161,-.3831,-1.4913;-1.1009,-1.5477,-.9383;-2.4161,-2.0774,-1.9961;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417055538</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002069092702 0.000272156459 0.017622529366 0.005437414987</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030683374 -0.000220809 0.000094496 0.000126202 0.000145985 0.000335168 0.000360420 0.000442497 0.000586340 0.000813968 0.000942584 0.001064468 0.001233226 0.001345391 0.001377481 0.001422087 0.001565751 0.001821264 0.001823592 0.001951518 0.002216433 0.002362558 0.002609020 0.002684264 0.002691252 0.003004818 0.003118042 0.003451128 0.003521913 0.003909392 0.004450750 0.004711576 0.004802740 0.005088528 0.006011965 0.006108802 0.006172021 0.006635377 0.006973392 0.007753200 0.008105556 0.008230821 0.009311929 0.009522167 0.010028499 0.010671820 0.010909375 0.011041948 0.011765020 0.012268622 0.012952414 0.013120414 0.014058573 0.014575812 0.015174469 0.015517018 0.015738285 0.016311899 0.016994406 0.017469900 0.018120514 0.018510873 0.019425685 0.019586088 0.020043654 0.020809384 0.021222529 0.021434852 0.022595517 0.023154704 0.025049723 0.026299451 0.026796791 0.027344466 0.027728476 0.029493431 0.029663365 0.031518622 0.033296778 0.033586726 0.033957537 0.035790798 0.036905105 0.037713129 0.039592758 0.040060517 0.040851593 0.042342548 0.044258477 0.045201428 0.045446469 0.047083358 0.047830104 0.049240048 0.050416377 0.050988913 0.051212693 0.051423834 0.052483271 0.052671104 0.052916504 0.053111857 0.054722106 0.054941900 0.055984825 0.056272328 0.056522174 0.056683333 0.057189388 0.059043708 0.060447623 0.060909944 0.061703702 0.062314121 0.063315634 0.064512754 0.065357811 0.065961500 0.066538087 0.068283925 0.069059708 0.070255829 0.072735206 0.074497148 0.074780254 0.076326447 0.078432507 0.084042443 0.086522333 0.087101345 0.087550341 0.088877662 0.090541162 0.091052006 0.093513765 0.094620125 0.095447206 0.096418927 0.097847185 0.098809182 0.099128781 0.100149930 0.100804572 0.102450215 0.103202890 0.103459826 0.104055870 0.104461309 0.106313485 0.106950497 0.107865821 0.109726051 0.110932228 0.112186500 0.112828848 0.114973285 0.116168352 0.116694491 0.118683565 0.120732073 0.121599789 0.123091339 0.124407910 0.125525399 0.126202029 0.126607784 0.127103509 0.132032566 0.135078675 0.135805490 0.142787388 0.143734296 0.147047561 0.147587663 0.149726700 0.152748718 0.154670733 0.156309625 0.156788994 0.161524041 0.161886421 0.173712237 0.174152428 0.180275555 0.184695078 0.186211793 0.189607176 0.190382115 0.194109288 0.194756614 0.198471140 0.200232894 0.205228000 0.206917185 0.207339219 0.210226930 0.215241874 0.216592717 0.217896008 0.219088351 0.220764420 0.225275180 0.226564090 0.232149608 0.235115316 0.235594948 0.235957446 0.244615537 0.256020395 0.257254962 0.263705406 0.269916611 0.280371492 0.283197391 0.286316091 0.291784316 0.296757270 0.304375781 0.305775395 0.307300652 0.314304831 0.316747304 0.317380876 0.322220494 0.329924533 0.332858775 0.351782863 0.352166692 0.355096182 0.355789343 0.360086343 0.362836526 0.364164430 0.384456747 0.386018689 0.392174281 0.410715230 0.425715561 0.430953712 0.462363733 0.468827718 0.478368233 0.483687199 0.484439986 0.487982434 0.491440971 0.509593877 0.515520724 0.535316715 0.568943966 0.575190359 0.592589639 0.593988102 0.606602314 0.608196516 0.644696029 0.647102361 0.649513785 0.674297734 0.678092536 0.685920189 0.691981539 0.693505092 0.700065400 0.704428464 0.717972656 0.741631076 0.751320516 0.759400785 0.769685506 0.773180781 0.778908876 0.810987632 0.815502425 0.819793218 0.822182875 0.823538454 0.831637612 0.834911192 0.836409919 0.842422545 0.845841854 0.847533282 0.849760690 0.859206659 0.865918041 0.866994466 0.874183708 0.885600168 0.886105568 0.889691984 0.899899210 0.901018383 0.904113361 0.923438339 0.927751978 0.935828125 0.937424937 0.966180226 0.976090347 0.986090966 1.001168625 1.019283284 1.028333508 1.041967875 1.050921069 1.057584065 1.068825314 1.086673926 1.088740175 1.104603340 1.107389136 1.112504892 1.124888084 1.135976232 1.138160048 1.144626947 1.174947297 1.179012593 1.181242693 1.186926184 1.191466228 1.196366577 1.224653358 1.228346700 1.275065752 1.302594336 1.319926618 1.328288999 1.333373591 1.336338674 1.336503597 1.342889850 1.343218946 1.345077914 1.359208466 1.378784674 1.382987187 1.385251048 1.415909202 1.420378963 1.436739551 1.551487219 1.681808666 1.776400209</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">243</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34275929" y3="0.05409492" z3="-0.19347036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39116276" y3="0.16459669" z3="0.40882064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65018023" y3="0.44054114" z3="-0.34769295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7278915" y3="1.23896733" z3="-2.26221782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38913958" y3="0.43908125" z3="-1.183243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72733447" y3="0.84567474" z3="-3.6590233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63169328" y3="1.74962662" z3="-3.13387062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37500331" y3="2.58783525" z3="-4.60988155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55798898" y3="1.24739323" z3="-4.3702947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49427623" y3="2.92146192" z3="-5.16744264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92564598" y3="-0.48405412" z3="-3.43704687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09902256" y3="0.05021804" z3="-0.99813629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4022458" y3="-1.095498" z3="-1.99579257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93057523" y3="-0.96479297" z3="-1.82384338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10494524" y3="-2.41924447" z3="-1.83824504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14567258" y3="-3.61663972" z3="0.67703015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00195233" y3="-5.2515395" z3="-4.74007721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2337046" y3="-4.99464982" z3="-3.70294817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8396735" y3="-4.3057362" z3="-1.08504967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78762661" y3="-4.58415049" z3="-2.84853544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55053216" y3="-5.08705633" z3="-3.24837554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85441721" y3="-4.73693474" z3="-1.93510832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49686932" y3="-4.25474754" z3="-1.52312046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82158394" y3="-4.50226854" z3="-3.19270094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34772578" y3="-5.40161345" z3="-3.92590088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89220539" y3="-4.77650824" z3="-1.59434229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03324127" y3="-3.85885949" z3="0.23567402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17493697" y3="-3.64589245" z3="0.87799735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06240052" y3="-4.10626612" z3="0.44104625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17327862" y3="-3.51259255" z3="2.34512435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23751526" y3="-3.32883459" z3="5.14296862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37185178" y3="-3.71378221" z3="3.04524814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00681239" y3="-3.2263281" z3="3.07009206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03601424" y3="-3.13488272" z3="4.45865227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40303123" y3="-3.62412234" z3="4.43408783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28659047" y3="-3.94975738" z3="2.49440087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04557279" y3="-3.09637066" z3="2.56828732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1070626" y3="-2.93129271" z3="4.99908764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34344136" y3="-3.7913989" z3="4.96670784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26037708" y3="-3.26505899" z3="6.23445414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41477375" y3="-3.88944583" z3="-0.6168187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1753604" y3="-3.38634705" z3="-1.06782634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52039143" y3="0.23995675" z3="-4.70923233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07976288" y3="-1.71618816" z3="0.02137643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90570971" y3="-0.96659673" z3="1.18391236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84484634" y3="-0.31689631" z3="1.52050292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36292949" y3="0.54624561" z3="1.22658113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43922597" y3="1.45831884" z3="-0.39299742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98138847" y3="-0.7190936" z3="1.39290173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33582979" y3="1.72542965" z3="2.68169425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88264585" y3="-0.95619044" z3="2.07964691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65595388" y3="-0.34310583" z3="3.33884884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20569666" y3="0.77229408" z3="-1.22512026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33874181" y3="2.24437216" z3="-0.3850719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41716662" y3="1.9475273" z3="-0.54819352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01022161" y3="-1.08992287" z3="2.43082101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95632452" y3="-0.25941483" z3="1.15574533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85167183" y3="-1.55555315" z3="0.68747644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39639664" y3="1.17760295" z3="3.6386635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60785354" y3="2.30096461" z3="2.68374146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1690196" y3="2.44919636" z3="2.64054053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79653963" y3="-0.80182739" z3="3.85353381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57293415" y3="-0.51465955" z3="3.9181735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48179554" y3="0.73884423" z3="3.21932158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84329908" y3="-0.70071858" z3="0.99088268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42759486" y3="-2.03146334" z3="0.85711812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7735836" y3="-2.67626078" z3="1.89982326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5518456" y3="-1.97712163" z3="3.08261842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02019197" y3="-0.68050543" z3="3.27347894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67435419" y3="-0.04942281" z3="2.2201384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54229125" y3="-2.53423982" z3="-0.10423701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38491905" y3="-3.6882768" z3="1.77980875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68544016" y3="-2.57547693" z3="4.10333561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82804473" y3="-0.16606768" z3="4.21588724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0095093" y3="0.98550195" z3="2.33188105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79755797" y3="0.45716269" z3="-4.28548119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77537868" y3="-0.51198914" z3="-4.46658169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42468752" y3="-1.70214189" z3="-5.09261328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13715412" y3="-1.92989474" z3="-5.56907032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83344356" y3="-0.95754068" z3="-5.36697371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04452574" y3="1.379085" z3="-3.75309973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79479167" y3="-0.36843503" z3="-4.10743998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43488252" y3="-2.75257937" z3="-5.2352974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0955516" y3="-2.86900731" z3="-6.07105329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85593616" y3="-1.14074083" z3="-5.70128139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34233497" y3="-1.87660044" z3="5.03680354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31807206" y3="-3.72056837" z3="3.94003448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2073226" y3="-3.65573391" z3="-6.01171021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44015933" y3="-2.66661596" z3="-4.55829513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07317227" y3="1.16039032" z3="-1.49831448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11082541" y3="1.55273854" z3="-2.47376941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4424763" y3="1.48407235" z3="-1.70128007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85098956" y3="2.14673445" z3="-2.83252513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17042917" y3="1.18396814" z3="-0.94114972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90840328" y3="2.38631741" z3="-2.98043626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56941635" y3="2.2211739" z3="-3.64321673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90132061" y3="2.50860423" z3="-3.81787782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84649474" y3="2.49622898" z3="-4.4147223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23148563" y3="3.01611583" z3="-4.72880346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39823993" y3="3.15291854" z3="-3.33085184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27973872" y3="3.56337744" z3="-4.11459037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20594781" y3="4.16540181" z3="-2.73946182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95165886" y3="5.49769596" z3="-2.96172403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0375898" y3="3.87798892" z3="-2.09418198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58791278" y3="6.25530104" z3="-2.49388619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05021553" y3="4.94948191" z3="-4.33728879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87085024" y3="5.89932948" z3="-3.78215283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19582094" y3="5.24567308" z3="-4.95382546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68389854" y3="6.96203793" z3="-3.95821622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4780612" y3="-2.19108313" z3="-0.30109705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44824287" y3="-2.98406625" z3="-1.06766087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01016845" y3="-2.57152695" z3="0.58564193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08947208" y3="-1.36997633" z3="-0.72113051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17342133" y3="-1.42022059" z3="-1.14683964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30728472" y3="-0.37835361" z3="-1.4934357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09794822" y3="-1.54699859" z3="-0.94012895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41378503" y3="-2.07313507" z3="-1.99933039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.0541,-.1935;7.3912,.1646,.4088;6.6502,.4405,-.3477;4.7279,1.239,-2.2622;4.3891,.4391,-1.1832;2.7273,.8457,-3.659;3.6317,1.7496,-3.1339;1.375,2.5878,-4.6099;1.558,1.2474,-4.3703;.4943,2.9215,-5.1674;2.9256,-.4841,-3.437;3.099,.0502,-.9981;2.4022,-1.0955,-1.9958;.9306,-.9648,-1.8238;3.1049,-2.4192,-1.8382;-.1457,-3.6166,.677;-.002,-5.2515,-4.7401;-.2337,-4.9946,-3.7029;-.8397,-4.3057,-1.085;.7876,-4.5842,-2.8485;-1.5505,-5.0871,-3.2484;-1.8544,-4.7369,-1.9351;.4969,-4.2547,-1.5231;1.8216,-4.5023,-3.1927;-2.3477,-5.4016,-3.9259;-2.8922,-4.7765,-1.5943;-1.0332,-3.8589,.2357;-2.1749,-3.6459,.878;-3.0624,-4.1063,.441;-2.1733,-3.5126,2.3451;-2.2375,-3.3288,5.143;-3.3719,-3.7138,3.0452;-1.0068,-3.2263,3.0701;-1.036,-3.1349,4.4587;-3.403,-3.6241,4.4341;-4.2866,-3.9498,2.4944;-.0456,-3.0964,2.5683;-.1071,-2.9313,4.9991;-4.3434,-3.7914,4.9667;-2.2604,-3.2651,6.2345;1.4148,-3.8894,-.6168;2.1754,-3.3863,-1.0678;.5204,.24,-4.7092;-3.0798,-1.7162,.0214;-2.9057,-.9666,1.1839;-1.8448,-.3169,1.5205;-.3629,.5462,1.2266;-.4392,1.4583,-.393;.9814,-.7191,1.3929;-.3358,1.7254,2.6817;-3.8826,-.9562,2.0796;-3.656,-.3431,3.3388;-.2057,.7723,-1.2251;.3387,2.2444,-.3851;-1.4172,1.9475,-.5482;1.0102,-1.0899,2.4308;1.9563,-.2594,1.1557;.8517,-1.5556,.6875;-.3964,1.1776,3.6387;.6079,2.301,2.6837;-1.169,2.4492,2.6405;-2.7965,-.8018,3.8535;-4.5729,-.5147,3.9182;-3.4818,.7388,3.2193;4.8433,-.7007,.9909;4.4276,-2.0315,.8571;3.7736,-2.6763,1.8998;3.5518,-1.9771,3.0826;4.0202,-.6805,3.2735;4.6744,-.0494,2.2201;4.5423,-2.5342,-.1042;3.3849,-3.6883,1.7798;2.6854,-2.5755,4.1033;3.828,-.1661,4.2159;5.0095,.9855,2.3319;-.7976,.4572,-4.2855;-1.7754,-.512,-4.4666;-1.4247,-1.7021,-5.0926;-.1372,-1.9299,-5.5691;.8334,-.9575,-5.367;-1.0445,1.3791,-3.7531;-2.7948,-.3684,-4.1074;-2.4349,-2.7526,-5.2353;.0956,-2.869,-6.0711;1.8559,-1.1407,-5.7013;2.3423,-1.8766,5.0368;2.3181,-3.7206,3.94;-2.2073,-3.6557,-6.0117;-3.4402,-2.6666,-4.5583;7.0732,1.1604,-1.4983;6.1108,1.5527,-2.4738;8.4425,1.4841,-1.7013;8.851,2.1467,-2.8325;9.1704,1.184,-.9411;9.9084,2.3863,-2.9804;6.5694,2.2212,-3.6432;7.9013,2.5086,-3.8179;5.8465,2.4962,-4.4147;8.2315,3.0161,-4.7288;3.3982,3.1529,-3.3309;2.2797,3.5634,-4.1146;4.2059,4.1654,-2.7395;3.9517,5.4977,-2.9617;5.0376,3.878,-2.0942;4.5879,6.2553,-2.4939;2.0502,4.9495,-4.3373;2.8709,5.8993,-3.7822;1.1958,5.2457,-4.9538;2.6839,6.962,-3.9582;-4.4781,-2.1911,-.3011;-4.4482,-2.9841,-1.0677;-5.0102,-2.5715,.5856;-5.0895,-1.37,-.7211;-2.1734,-1.4202,-1.1468;-2.3073,-.3784,-1.4934;-1.0979,-1.547,-.9401;-2.4138,-2.0731,-1.9993;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650415743838</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001407059300 0.000220055698 0.019243565679 0.005337294918</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030683907 -0.000388635 0.000096258 0.000144664 0.000199711 0.000338598 0.000354882 0.000444366 0.000587495 0.000813785 0.000943631 0.001064423 0.001233822 0.001346695 0.001377368 0.001421189 0.001566374 0.001821243 0.001823198 0.001951961 0.002215367 0.002361654 0.002609633 0.002684384 0.002691629 0.003004900 0.003119067 0.003451510 0.003522416 0.003909452 0.004451596 0.004711588 0.004802919 0.005088446 0.006012350 0.006108868 0.006176694 0.006642550 0.006975558 0.007752620 0.008105995 0.008230634 0.009314772 0.009522029 0.010029329 0.010672574 0.010910146 0.011042227 0.011773801 0.012272265 0.012954737 0.013121598 0.014059275 0.014575996 0.015174087 0.015518654 0.015745870 0.016315210 0.017000892 0.017471063 0.018121925 0.018513734 0.019426286 0.019588641 0.020043845 0.020809506 0.021222509 0.021434711 0.022596253 0.023154620 0.025050761 0.026300555 0.026796752 0.027393562 0.027730351 0.029493448 0.029672036 0.031522845 0.033297824 0.033588278 0.033957637 0.035790811 0.036905511 0.037721312 0.039595069 0.040062360 0.040851325 0.042342702 0.044258211 0.045206193 0.045447598 0.047087903 0.047835597 0.049240630 0.050416340 0.050988825 0.051213680 0.051425272 0.052483266 0.052674683 0.052917077 0.053111885 0.054722531 0.054941899 0.055990198 0.056272326 0.056524812 0.056683311 0.057189729 0.059046526 0.060453620 0.060911843 0.061703654 0.062319221 0.063315959 0.064515031 0.065359952 0.065970737 0.066538327 0.068289315 0.069060501 0.070255900 0.072735271 0.074498788 0.074780369 0.076326842 0.078432528 0.084046157 0.086526799 0.087101752 0.087558412 0.088878972 0.090544228 0.091072635 0.093555735 0.094626684 0.095447957 0.096419704 0.097847384 0.098809510 0.099147723 0.100156042 0.100809378 0.102450077 0.103205700 0.103468797 0.104057313 0.104460414 0.106316045 0.106950410 0.107878550 0.109732303 0.110932552 0.112198675 0.112828618 0.114984982 0.116168658 0.116694498 0.118683700 0.120742176 0.121600489 0.123099796 0.124408369 0.125525912 0.126206478 0.126618865 0.127109199 0.132032157 0.135078429 0.135806576 0.142787158 0.143736200 0.147048311 0.147587595 0.149727997 0.152754835 0.154671616 0.156309806 0.156789050 0.161534412 0.161892001 0.173722106 0.174164608 0.180314829 0.184716493 0.186216115 0.189607162 0.190386470 0.194112012 0.194763984 0.198476078 0.200241797 0.205229735 0.206919247 0.207343812 0.210226996 0.215242474 0.216601085 0.217896046 0.219093871 0.220767394 0.225275619 0.226571194 0.232150191 0.235115370 0.235594944 0.235961857 0.244616820 0.256020340 0.257254961 0.263709332 0.269918166 0.280372116 0.283213221 0.286316925 0.291799456 0.296764907 0.304379284 0.305777164 0.307301447 0.314305092 0.316747830 0.317380912 0.322221242 0.329924700 0.332860914 0.351783010 0.352168900 0.355096176 0.355796948 0.360088180 0.362838073 0.364167227 0.384456943 0.386020052 0.392174291 0.410716017 0.425716216 0.430953665 0.462367682 0.468833173 0.478368325 0.483698115 0.484440274 0.487983241 0.491444342 0.509595263 0.515534444 0.535317626 0.568953577 0.575193172 0.592589660 0.593994028 0.606653845 0.608197110 0.644695931 0.647104767 0.649529520 0.674300325 0.678097912 0.685925048 0.691982020 0.693514917 0.700066040 0.704430237 0.717974023 0.741660024 0.751325077 0.759401157 0.769685519 0.773186668 0.778922411 0.810988425 0.815533911 0.819794579 0.822234002 0.823538757 0.831644658 0.834911193 0.836417473 0.842422530 0.845844600 0.847535410 0.849768016 0.859216230 0.865918388 0.867022566 0.874186632 0.885662400 0.886120131 0.889692403 0.899901277 0.901021205 0.904113613 0.923439433 0.927752681 0.935866566 0.937438920 0.966180323 0.976093109 0.986091084 1.001172266 1.019329758 1.028336941 1.041984399 1.050930080 1.057585505 1.068825603 1.086677644 1.088740942 1.104605102 1.107455485 1.112505046 1.124888144 1.135977747 1.138312052 1.144628232 1.174996299 1.179017336 1.181243290 1.186931257 1.191467158 1.196388311 1.224653363 1.228346801 1.275066429 1.302596505 1.319942434 1.328295913 1.333381663 1.336341045 1.336518972 1.342893744 1.343248326 1.345079468 1.359222691 1.378787261 1.382990716 1.385257220 1.415917533 1.420385466 1.436749214 1.551487215 1.681850730 1.776406536</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">244</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34146295" y3="0.04921744" z3="-0.19300452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38839172" y3="0.16695655" z3="0.41357039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64788739" y3="0.44124387" z3="-0.34402898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72621856" y3="1.23598163" z3="-2.26072651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38823233" y3="0.43315211" z3="-1.18360035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72645585" y3="0.84237997" z3="-3.65952427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62947519" y3="1.7468491" z3="-3.13169103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37230324" y3="2.58628074" z3="-4.60657851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55665452" y3="1.24461536" z3="-4.36972388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49159934" y3="2.92036611" z3="-5.16382256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92633587" y3="-0.48774987" z3="-3.44024706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09876211" y3="0.0418908" z3="-1.00019647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40274876" y3="-1.10208084" z3="-2.00024784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93105294" y3="-0.97219376" z3="-1.82758213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1056206" y3="-2.42601888" z3="-1.84531784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14388489" y3="-3.61377258" z3="0.67416634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00936366" y3="-5.25836227" z3="-4.7405345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23913826" y3="-4.99958939" z3="-3.70336143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84014711" y3="-4.30686072" z3="-1.08526747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78486617" y3="-4.59137201" z3="-2.85028973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55600864" y3="-5.08774902" z3="-3.24719521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85740698" y3="-4.73604534" z3="-1.93391357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49614153" y3="-4.25961556" z3="-1.52501002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8180437" y3="-4.51124963" z3="-3.19560801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35326622" y3="-5.40296013" z3="-3.92318081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89402052" y3="-4.77455963" z3="-1.59198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03145306" y3="-3.85774962" z3="0.23506562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17249744" y3="-3.6435169" z3="0.87832109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05996824" y3="-4.10477549" z3="0.44295493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16973198" y3="-3.50849126" z3="2.34534301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23259564" y3="-3.32122924" z3="5.143018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36818989" y3="-3.70785829" z3="3.04637904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00248364" y3="-3.22247343" z3="3.06940597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03134755" y3="-3.12901302" z3="4.45778434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39862134" y3="-3.61659265" z3="4.43512883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28310223" y3="-3.94435014" z3="2.49642952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04086851" y3="-3.09474056" z3="2.56698465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10225914" y3="-2.9256622" z3="4.99780025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33821596" y3="-3.7836928" z3="4.96837453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25475693" y3="-3.25618156" z3="6.23443293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41484511" y3="-3.89382932" z3="-0.62042019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17480506" y3="-3.39195478" z3="-1.07296673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51900758" y3="0.2371797" z3="-4.7093094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07772629" y3="-1.71501285" z3="0.02082322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90221412" y3="-0.96346518" z3="1.18197239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84020213" y3="-0.31375913" z3="1.51573208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35972378" y3="0.55079384" z3="1.22033253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43393632" y3="1.45573932" z3="-0.40311078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98548868" y3="-0.71274964" z3="1.39459629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33760573" y3="1.73784408" z3="2.66931985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87795353" y3="-0.95120475" z3="2.07885727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64956634" y3="-0.33630571" z3="3.33693168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2011137" y3="0.76627071" z3="-1.23270207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34567962" y3="2.2405467" z3="-0.39771594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41102955" y3="1.9459799" z3="-0.56064104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01250189" y3="-1.08009178" z3="2.43370372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95929876" y3="-0.25233673" z3="1.15772752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85754915" y3="-1.55145395" z3="0.69129355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40110301" y3="1.19530789" z3="3.62933935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60504072" y3="2.31464208" z3="2.67098158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17141173" y3="2.46052703" z3="2.62129696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79001364" y3="-0.79496693" z3="3.85156936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56604368" y3="-0.50641599" z3="3.91721602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47501921" y3="0.74520774" z3="3.21541965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84300206" y3="-0.70791243" z3="0.99012357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42316744" y3="-2.03702608" z3="0.85308821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76959096" y3="-2.68323562" z3="1.89505704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55290055" y3="-1.98730825" z3="3.08058893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02567562" y3="-0.69282605" z3="3.27461919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6789259" y3="-0.06010894" z3="2.22173515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53291439" y3="-2.5366828" z3="-0.11127564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37722092" y3="-3.69362569" z3="1.77229353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68862494" y3="-2.58691113" z3="4.10231808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83694637" y3="-0.1809211" z3="4.2186156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01674013" y3="0.9735417" z3="2.3356857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79872805" y3="0.45483321" z3="-4.28581693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7768319" y3="-0.51395883" z3="-4.46682838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42649165" y3="-1.70414524" z3="-5.0938137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13940375" y3="-1.9323391" z3="-5.57015897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83158684" y3="-0.96012292" z3="-5.36729484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04568936" y3="1.3766925" z3="-3.75280809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79616579" y3="-0.37018447" z3="-4.1077015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43691896" y3="-2.75453543" z3="-5.23645244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09298104" y3="-2.87134768" z3="-6.07281146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85393361" y3="-1.14352889" z3="-5.7017133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35246191" y3="-1.89107814" z3="5.0409731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31729572" y3="-3.72986592" z3="3.93605988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21022184" y3="-3.6571332" z3="-6.01346394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44153779" y3="-2.66921516" z3="-4.55813107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07044539" y3="1.1643154" z3="-1.49269792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10840772" y3="1.5536241" z3="-2.4698053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43891078" y3="1.49463592" z3="-1.69179227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84742042" y3="2.16208891" z3="-2.82064745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16613177" y3="1.19565633" z3="-0.93062363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90332926" y3="2.40316071" z3="-2.96621754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56686976" y3="2.22486871" z3="-3.63742965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89854191" y3="2.52098376" z3="-3.8078627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84451763" y3="2.49754921" z3="-4.41033768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22867293" y3="3.030496" z3="-4.71741939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39465085" y3="3.15031941" z3="-3.32630862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27687154" y3="3.5609137" z3="-4.11102837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20093873" y3="4.16232663" z3="-2.7326067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94595765" y3="5.49517974" z3="-2.9530958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03179892" y3="3.87441501" z3="-2.08658252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5827147" y3="6.25080294" z3="-2.48568558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0482226" y3="4.9462525" z3="-4.33412277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86666613" y3="5.89697001" z3="-3.77532551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19487923" y3="5.24264363" z3="-4.95190942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67857262" y3="6.96039657" z3="-3.94978642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4766747" y3="-2.18973216" z3="-0.29954771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44808492" y3="-2.98297986" z3="-1.06579439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00737711" y3="-2.5696708" z3="0.58807726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08895435" y3="-1.36881865" z3="-0.71896881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17281922" y3="-1.42021532" z3="-1.14890771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30653369" y3="-0.37939728" z3="-1.49611263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09646518" y3="-1.54892806" z3="-0.9444818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41540612" y3="-2.07316408" z3="-2.00067951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3415,.0492,-.193;7.3884,.167,.4136;6.6479,.4412,-.344;4.7262,1.236,-2.2607;4.3882,.4332,-1.1836;2.7265,.8424,-3.6595;3.6295,1.7468,-3.1317;1.3723,2.5863,-4.6066;1.5567,1.2446,-4.3697;.4916,2.9204,-5.1638;2.9263,-.4877,-3.4402;3.0988,.0419,-1.0002;2.4027,-1.1021,-2.0002;.9311,-.9722,-1.8276;3.1056,-2.426,-1.8453;-.1439,-3.6138,.6742;-.0094,-5.2584,-4.7405;-.2391,-4.9996,-3.7034;-.8401,-4.3069,-1.0853;.7849,-4.5914,-2.8503;-1.556,-5.0877,-3.2472;-1.8574,-4.736,-1.9339;.4961,-4.2596,-1.525;1.818,-4.5112,-3.1956;-2.3533,-5.403,-3.9232;-2.894,-4.7746,-1.592;-1.0315,-3.8577,.2351;-2.1725,-3.6435,.8783;-3.06,-4.1048,.443;-2.1697,-3.5085,2.3453;-2.2326,-3.3212,5.143;-3.3682,-3.7079,3.0464;-1.0025,-3.2225,3.0694;-1.0313,-3.129,4.4578;-3.3986,-3.6166,4.4351;-4.2831,-3.9444,2.4964;-.0409,-3.0947,2.567;-.1023,-2.9257,4.9978;-4.3382,-3.7837,4.9684;-2.2548,-3.2562,6.2344;1.4148,-3.8938,-.6204;2.1748,-3.392,-1.073;.519,.2372,-4.7093;-3.0777,-1.715,.0208;-2.9022,-.9635,1.182;-1.8402,-.3138,1.5157;-.3597,.5508,1.2203;-.4339,1.4557,-.4031;.9855,-.7127,1.3946;-.3376,1.7378,2.6693;-3.878,-.9512,2.0789;-3.6496,-.3363,3.3369;-.2011,.7663,-1.2327;.3457,2.2405,-.3977;-1.411,1.946,-.5606;1.0125,-1.0801,2.4337;1.9593,-.2523,1.1577;.8575,-1.5515,.6913;-.4011,1.1953,3.6293;.605,2.3146,2.671;-1.1714,2.4605,2.6213;-2.79,-.795,3.8516;-4.566,-.5064,3.9172;-3.475,.7452,3.2154;4.843,-.7079,.9901;4.4232,-2.037,.8531;3.7696,-2.6832,1.8951;3.5529,-1.9873,3.0806;4.0257,-.6928,3.2746;4.6789,-.0601,2.2217;4.5329,-2.5367,-.1113;3.3772,-3.6936,1.7723;2.6886,-2.5869,4.1023;3.8369,-.1809,4.2186;5.0167,.9735,2.3357;-.7987,.4548,-4.2858;-1.7768,-.514,-4.4668;-1.4265,-1.7041,-5.0938;-.1394,-1.9323,-5.5702;.8316,-.9601,-5.3673;-1.0457,1.3767,-3.7528;-2.7962,-.3702,-4.1077;-2.4369,-2.7545,-5.2365;.093,-2.8713,-6.0728;1.8539,-1.1435,-5.7017;2.3525,-1.8911,5.041;2.3173,-3.7299,3.9361;-2.2102,-3.6571,-6.0135;-3.4415,-2.6692,-4.5581;7.0704,1.1643,-1.4927;6.1084,1.5536,-2.4698;8.4389,1.4946,-1.6918;8.8474,2.1621,-2.8206;9.1661,1.1957,-.9306;9.9033,2.4032,-2.9662;6.5669,2.2249,-3.6374;7.8985,2.521,-3.8079;5.8445,2.4975,-4.4103;8.2287,3.0305,-4.7174;3.3947,3.1503,-3.3263;2.2769,3.5609,-4.111;4.2009,4.1623,-2.7326;3.946,5.4952,-2.9531;5.0318,3.8744,-2.0866;4.5827,6.2508,-2.4857;2.0482,4.9463,-4.3341;2.8667,5.897,-3.7753;1.1949,5.2426,-4.9519;2.6786,6.9604,-3.9498;-4.4767,-2.1897,-.2995;-4.4481,-2.983,-1.0658;-5.0074,-2.5697,.5881;-5.089,-1.3688,-.719;-2.1728,-1.4202,-1.1489;-2.3065,-.3794,-1.4961;-1.0965,-1.5489,-.9445;-2.4154,-2.0732,-2.0007;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650419488684</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001508827921 0.000243567015 0.020009871038 0.005340798774</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030684470 -0.000492706 0.000090490 0.000103224 0.000197288 0.000334280 0.000351646 0.000447532 0.000587388 0.000814895 0.000946750 0.001061345 0.001232668 0.001335701 0.001377639 0.001423088 0.001571109 0.001817780 0.001824844 0.001951536 0.002181559 0.002353202 0.002608969 0.002669835 0.002696623 0.003005250 0.003119659 0.003443111 0.003515880 0.003905852 0.004451832 0.004708873 0.004799549 0.005084692 0.006011498 0.006111277 0.006183137 0.006643042 0.006981439 0.007756993 0.008107210 0.008231282 0.009307254 0.009522759 0.010029996 0.010642790 0.010909488 0.011039526 0.011774289 0.012275140 0.012956663 0.013117645 0.014058146 0.014576523 0.015173949 0.015518839 0.015755373 0.016316276 0.017007146 0.017475015 0.018123791 0.018519053 0.019427345 0.019594496 0.020045192 0.020807903 0.021222520 0.021434550 0.022599142 0.023154812 0.025051614 0.026301898 0.026795653 0.027468927 0.027732047 0.029494639 0.029691152 0.031528852 0.033297846 0.033589442 0.033960070 0.035792094 0.036906299 0.037720273 0.039595973 0.040063294 0.040851364 0.042343773 0.044255570 0.045186880 0.045448117 0.047095400 0.047852097 0.049241242 0.050418547 0.050988201 0.051215121 0.051430342 0.052483191 0.052679281 0.052917748 0.053111872 0.054722912 0.054942456 0.055998863 0.056272175 0.056526763 0.056684693 0.057190621 0.059050465 0.060461688 0.060913595 0.061703455 0.062327065 0.063316496 0.064516490 0.065360929 0.065990526 0.066538490 0.068297689 0.069064604 0.070255303 0.072735130 0.074498315 0.074781481 0.076325908 0.078438228 0.084048403 0.086530215 0.087102800 0.087575137 0.088879076 0.090543749 0.091103104 0.093606570 0.094635699 0.095451807 0.096420196 0.097847789 0.098811899 0.099168644 0.100163684 0.100813444 0.102451625 0.103207080 0.103481853 0.104069625 0.104465549 0.106318409 0.106950089 0.107902711 0.109746337 0.110934955 0.112211477 0.112832707 0.114996565 0.116173931 0.116693411 0.118689965 0.120751303 0.121604474 0.123107601 0.124411718 0.125542221 0.126233428 0.126628132 0.127126249 0.132042067 0.135079983 0.135807773 0.142786300 0.143738450 0.147052327 0.147587446 0.149727581 0.152771489 0.154677317 0.156287841 0.156770401 0.161541046 0.161895370 0.173731458 0.174179302 0.180365141 0.184748348 0.186219606 0.189604485 0.190391993 0.194116315 0.194774256 0.198484118 0.200252699 0.205232740 0.206920496 0.207351760 0.210227102 0.215244546 0.216610671 0.217893753 0.219105188 0.220774622 0.225276787 0.226580476 0.232150837 0.235115036 0.235595637 0.235966550 0.244619049 0.256020587 0.257254996 0.263711237 0.269918228 0.280372116 0.283237402 0.286319136 0.291812969 0.296772319 0.304382321 0.305778544 0.307305310 0.314304258 0.316747539 0.317381170 0.322221948 0.329925531 0.332862330 0.351780494 0.352169896 0.355097833 0.355813479 0.360089106 0.362840837 0.364172378 0.384455998 0.386026820 0.392175285 0.410716447 0.425719255 0.430965313 0.462374935 0.468838847 0.478372642 0.483711209 0.484439541 0.487982914 0.491452205 0.509599760 0.515547411 0.535318435 0.568984774 0.575192396 0.592590239 0.594001753 0.606715795 0.608207406 0.644697218 0.647110589 0.649564870 0.674304112 0.678114031 0.685928203 0.691982695 0.693527523 0.700066026 0.704431702 0.717975258 0.741699152 0.751328314 0.759400713 0.769691433 0.773188566 0.778943392 0.810989374 0.815565212 0.819805183 0.822287330 0.823543172 0.831647978 0.834912781 0.836436513 0.842425882 0.845848386 0.847537987 0.849786686 0.859226420 0.865918741 0.867032336 0.874191604 0.885727785 0.886140629 0.889694537 0.899917134 0.901022399 0.904114675 0.923441577 0.927781017 0.935926115 0.937494741 0.966180436 0.976097875 0.986091398 1.001179085 1.019394709 1.028340488 1.042005103 1.050939386 1.057587443 1.068830723 1.086681399 1.088744955 1.104606155 1.107531003 1.112505451 1.124890513 1.135978851 1.138493038 1.144632592 1.175052357 1.179025150 1.181244952 1.186935466 1.191466136 1.196409309 1.224653996 1.228348603 1.275088420 1.302602615 1.319966740 1.328303754 1.333387238 1.336345753 1.336554852 1.342901574 1.343292734 1.345080799 1.359233624 1.378795056 1.382992502 1.385258006 1.415969915 1.420399790 1.436793605 1.551487242 1.681894919 1.776418666</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">245</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34359196" y3="0.04352592" z3="-0.19493051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38997793" y3="0.1645884" z3="0.41234091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64900029" y3="0.43848643" z3="-0.34496772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7259033" y3="1.2332513" z3="-2.26020421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38952548" y3="0.42736831" z3="-1.18488707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72573281" y3="0.84079816" z3="-3.65871644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62826297" y3="1.74449154" z3="-3.12970192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37061016" y3="2.58401017" z3="-4.60326888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55537272" y3="1.24309491" z3="-4.36822485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48942782" y3="2.91827673" z3="-5.15973157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92702886" y3="-0.48958988" z3="-3.44274655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10069327" y3="0.03357905" z3="-1.00174696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40465159" y3="-1.1083026" z3="-2.00418284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93294998" y3="-0.97938908" z3="-1.83077439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10775213" y3="-2.43250371" z3="-1.85251958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14203194" y3="-3.61419756" z3="0.67552897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01221972" y3="-5.26516101" z3="-4.73788326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24111529" y3="-5.00548927" z3="-3.7008483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84006619" y3="-4.30843685" z3="-1.08328695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78291978" y3="-4.59575097" z3="-2.84930507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55719496" y3="-5.09327767" z3="-3.24340931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85746176" y3="-4.73921593" z3="-1.93039251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49569022" y3="-4.26217632" z3="-1.52416725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81625115" y3="-4.51731149" z3="-3.19560623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3569318" y3="-5.40681852" z3="-3.91867333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89471623" y3="-4.77480777" z3="-1.5876269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03060174" y3="-3.85694034" z3="0.23639768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17126598" y3="-3.64155732" z3="0.87967359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05934765" y3="-4.10282236" z3="0.44515557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16853384" y3="-3.50321718" z3="2.34626173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23125384" y3="-3.30997939" z3="5.14350534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36695449" y3="-3.70103339" z3="3.04765514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00149746" y3="-3.21540916" z3="3.06962163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02998179" y3="-3.11951334" z3="4.45793249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39750573" y3="-3.60640902" z3="4.43618125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28219538" y3="-3.93816165" z3="2.49803006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04080706" y3="-3.08748327" z3="2.56675833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10045988" y3="-2.91602589" z3="4.9976105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33781877" y3="-3.77098487" z3="4.96984235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25345516" y3="-3.24249721" z3="6.23479925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4168319" y3="-3.89665268" z3="-0.62087809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1772966" y3="-3.39735912" z3="-1.07549385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51788157" y3="0.2360448" z3="-4.7087826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07611468" y3="-1.71421268" z3="0.0172864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90008437" y3="-0.96073673" z3="1.17698634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83790749" y3="-0.31107951" z3="1.50962659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35742264" y3="0.55373182" z3="1.21345319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42845996" y3="1.45307488" z3="-0.41339444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98819871" y3="-0.70871742" z3="1.39435789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33961736" y3="1.74621071" z3="2.65819941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8758737" y3="-0.94601776" z3="2.07398253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64695366" y3="-0.32790176" z3="3.33041316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19545334" y3="0.76052039" z3="-1.24030853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35165979" y3="2.2368929" z3="-0.40965792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4046104" y3="1.94433754" z3="-0.57388272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01399463" y3="-1.07288528" z3="2.43483746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9640917" y3="-0.25078967" z3="1.15696979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86062349" y3="-1.55030539" z3="0.69438225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4006711" y3="1.2073834" z3="3.62024048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60089743" y3="2.32681534" z3="2.65762577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17646157" y3="2.46521712" z3="2.60745915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78786948" y3="-0.78581324" z3="3.84635806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56371768" y3="-0.49520329" z3="3.91147954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47093699" y3="0.75312603" z3="3.20599167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84581165" y3="-0.71586063" z3="0.98702912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42130121" y3="-2.04333056" z3="0.84728319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7672536" y3="-2.68987323" z3="1.88879494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55465047" y3="-1.99602211" z3="3.07647634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0323915" y3="-0.703702" z3="3.27310161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68637113" y3="-0.07067982" z3="2.22089535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52893154" y3="-2.5414727" z3="-0.11759202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37182193" y3="-3.698724" z3="1.76443783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68944083" y3="-2.59491525" z3="4.09777941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84733429" y3="-0.19353301" z3="4.2191503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02845451" y3="0.96152611" z3="2.33731406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80011194" y3="0.45340209" z3="-4.28492974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77811405" y3="-0.51564645" z3="-4.46578134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42763403" y3="-1.70605888" z3="-5.09161256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14027938" y3="-1.93367125" z3="-5.56855089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83046232" y3="-0.96129119" z3="-5.3668718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04690687" y3="1.37526202" z3="-3.75236843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79737665" y3="-0.3719667" z3="-4.10623877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43758283" y3="-2.75708489" z3="-5.23293225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09209695" y3="-2.87282305" z3="-6.07050056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85274819" y3="-1.14456368" z3="-5.70161353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35699458" y3="-1.89997151" z3="5.03811401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.312537" y3="-3.73613111" z3="3.9285032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21106466" y3="-3.65983898" z3="-6.01010187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44149336" y3="-2.67220996" z3="-4.55382538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07008032" y3="1.16530909" z3="-1.49187648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10752085" y3="1.55504838" z3="-2.46818011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43756015" y3="1.49991994" z3="-1.68960149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84430253" y3="2.17056262" z3="-2.81676114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16557422" y3="1.20230748" z3="-0.92849692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.900309" y3="2.41946258" z3="-2.96023858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56456953" y3="2.23096854" z3="-3.63389463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89477224" y3="2.52911637" z3="-3.80350197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84176904" y3="2.50394888" z3="-4.40626368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22378031" y3="3.04327292" z3="-4.71130798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39160213" y3="3.14807146" z3="-3.32027436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27301439" y3="3.5595687" z3="-4.103305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.1957054" y3="4.15970025" z3="-2.72270085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93838101" y3="5.49241484" z3="-2.93905153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02658171" y3="3.87154134" z3="-2.07681621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57135455" y3="6.24972019" z3="-2.46567571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04040865" y3="4.94633989" z3="-4.31997822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85813686" y3="5.89531585" z3="-3.75964387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18619388" y3="5.24332387" z3="-4.93640576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66917907" y3="6.95830494" z3="-3.93136272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4750154" y3="-2.18927312" z3="-0.30224131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44643255" y3="-2.98578858" z3="-1.06524046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00710557" y3="-2.56509474" z3="0.58658851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08563542" y3="-1.3693616" z3="-0.72570735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17027392" y3="-1.42294495" z3="-1.15246251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30089706" y3="-0.38124129" z3="-1.50026697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09471725" y3="-1.55299576" z3="-0.94669858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41334042" y3="-2.07635918" z3="-2.00337733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3436,.0435,-.1949;7.39,.1646,.4123;6.649,.4385,-.345;4.7259,1.2333,-2.2602;4.3895,.4274,-1.1849;2.7257,.8408,-3.6587;3.6283,1.7445,-3.1297;1.3706,2.584,-4.6033;1.5554,1.2431,-4.3682;.4894,2.9183,-5.1597;2.927,-.4896,-3.4427;3.1007,.0336,-1.0017;2.4047,-1.1083,-2.0042;.9329,-.9794,-1.8308;3.1078,-2.4325,-1.8525;-.142,-3.6142,.6755;-.0122,-5.2652,-4.7379;-.2411,-5.0055,-3.7008;-.8401,-4.3084,-1.0833;.7829,-4.5958,-2.8493;-1.5572,-5.0933,-3.2434;-1.8575,-4.7392,-1.9304;.4957,-4.2622,-1.5242;1.8163,-4.5173,-3.1956;-2.3569,-5.4068,-3.9187;-2.8947,-4.7748,-1.5876;-1.0306,-3.8569,.2364;-2.1713,-3.6416,.8797;-3.0593,-4.1028,.4452;-2.1685,-3.5032,2.3463;-2.2313,-3.31,5.1435;-3.367,-3.701,3.0477;-1.0015,-3.2154,3.0696;-1.03,-3.1195,4.4579;-3.3975,-3.6064,4.4362;-4.2822,-3.9382,2.498;-.0408,-3.0875,2.5668;-.1005,-2.916,4.9976;-4.3378,-3.771,4.9698;-2.2535,-3.2425,6.2348;1.4168,-3.8967,-.6209;2.1773,-3.3974,-1.0755;.5179,.236,-4.7088;-3.0761,-1.7142,.0173;-2.9001,-.9607,1.177;-1.8379,-.3111,1.5096;-.3574,.5537,1.2135;-.4285,1.4531,-.4134;.9882,-.7087,1.3944;-.3396,1.7462,2.6582;-3.8759,-.946,2.074;-3.647,-.3279,3.3304;-.1955,.7605,-1.2403;.3517,2.2369,-.4097;-1.4046,1.9443,-.5739;1.014,-1.0729,2.4348;1.9641,-.2508,1.157;.8606,-1.5503,.6944;-.4007,1.2074,3.6202;.6009,2.3268,2.6576;-1.1765,2.4652,2.6075;-2.7879,-.7858,3.8464;-4.5637,-.4952,3.9115;-3.4709,.7531,3.206;4.8458,-.7159,.987;4.4213,-2.0433,.8473;3.7673,-2.6899,1.8888;3.5547,-1.996,3.0765;4.0324,-.7037,3.2731;4.6864,-.0707,2.2209;4.5289,-2.5415,-.1176;3.3718,-3.6987,1.7644;2.6894,-2.5949,4.0978;3.8473,-.1935,4.2192;5.0285,.9615,2.3373;-.8001,.4534,-4.2849;-1.7781,-.5156,-4.4658;-1.4276,-1.7061,-5.0916;-.1403,-1.9337,-5.5686;.8305,-.9613,-5.3669;-1.0469,1.3753,-3.7524;-2.7974,-.372,-4.1062;-2.4376,-2.7571,-5.2329;.0921,-2.8728,-6.0705;1.8527,-1.1446,-5.7016;2.357,-1.9,5.0381;2.3125,-3.7361,3.9285;-2.2111,-3.6598,-6.0101;-3.4415,-2.6722,-4.5538;7.0701,1.1653,-1.4919;6.1075,1.555,-2.4682;8.4376,1.4999,-1.6896;8.8443,2.1706,-2.8168;9.1656,1.2023,-.9285;9.9003,2.4195,-2.9602;6.5646,2.231,-3.6339;7.8948,2.5291,-3.8035;5.8418,2.5039,-4.4063;8.2238,3.0433,-4.7113;3.3916,3.1481,-3.3203;2.273,3.5596,-4.1033;4.1957,4.1597,-2.7227;3.9384,5.4924,-2.9391;5.0266,3.8715,-2.0768;4.5714,6.2497,-2.4657;2.0404,4.9463,-4.32;2.8581,5.8953,-3.7596;1.1862,5.2433,-4.9364;2.6692,6.9583,-3.9314;-4.475,-2.1893,-.3022;-4.4464,-2.9858,-1.0652;-5.0071,-2.5651,.5866;-5.0856,-1.3694,-.7257;-2.1703,-1.4229,-1.1525;-2.3009,-.3812,-1.5003;-1.0947,-1.553,-.9467;-2.4133,-2.0764,-2.0034;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416563321</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001655284934 0.000269466780 0.022262092770 0.005339354201</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030684561 -0.000316608 0.000091671 0.000104818 0.000155351 0.000335152 0.000358644 0.000451035 0.000588637 0.000815978 0.000947452 0.001061991 0.001233985 0.001337133 0.001378433 0.001424123 0.001572224 0.001817569 0.001825057 0.001952015 0.002182776 0.002353537 0.002608927 0.002670351 0.002695664 0.003005033 0.003120960 0.003444260 0.003515130 0.003907116 0.004452700 0.004710242 0.004800019 0.005084516 0.006011258 0.006112178 0.006183843 0.006646686 0.006983357 0.007757721 0.008107324 0.008233493 0.009308762 0.009523215 0.010030888 0.010642715 0.010910082 0.011039580 0.011786892 0.012277105 0.012957234 0.013117353 0.014058053 0.014576666 0.015178897 0.015518964 0.015767753 0.016317931 0.017009182 0.017478387 0.018126425 0.018527096 0.019430551 0.019596981 0.020045014 0.020807863 0.021222634 0.021434614 0.022600179 0.023154799 0.025055112 0.026301561 0.026795807 0.027528325 0.027735905 0.029497065 0.029717073 0.031538290 0.033297910 0.033590517 0.033961609 0.035792975 0.036906339 0.037724312 0.039599274 0.040063700 0.040852663 0.042344195 0.044257033 0.045188793 0.045448533 0.047101161 0.047867117 0.049242199 0.050420397 0.050988226 0.051217594 0.051434799 0.052483194 0.052682875 0.052918527 0.053111903 0.054722768 0.054942717 0.056004738 0.056272440 0.056527902 0.056686087 0.057191955 0.059053682 0.060467311 0.060916880 0.061703458 0.062336273 0.063317101 0.064519689 0.065362074 0.066009126 0.066538967 0.068303033 0.069069766 0.070256856 0.072735343 0.074500927 0.074782413 0.076326059 0.078440634 0.084049387 0.086533608 0.087103926 0.087587777 0.088880910 0.090543885 0.091134600 0.093653286 0.094645085 0.095459112 0.096420217 0.097848505 0.098813689 0.099190046 0.100170091 0.100820034 0.102452573 0.103208876 0.103502447 0.104080206 0.104465353 0.106320007 0.106950079 0.107920559 0.109754169 0.110937007 0.112219125 0.112838284 0.115008369 0.116175859 0.116694520 0.118692571 0.120756243 0.121615242 0.123116596 0.124414751 0.125549561 0.126234217 0.126632677 0.127136245 0.132042064 0.135080069 0.135807962 0.142786114 0.143738843 0.147053615 0.147587360 0.149727024 0.152789512 0.154677567 0.156287923 0.156771300 0.161550182 0.161899332 0.173735991 0.174189544 0.180414197 0.184771260 0.186225165 0.189605315 0.190392777 0.194119321 0.194786743 0.198493842 0.200262181 0.205234602 0.206921648 0.207357921 0.210227369 0.215248933 0.216625383 0.217895048 0.219111756 0.220777995 0.225277236 0.226593571 0.232151711 0.235115108 0.235596689 0.235970195 0.244622265 0.256020827 0.257255003 0.263713638 0.269918638 0.280372311 0.283260709 0.286322222 0.291823969 0.296777955 0.304385073 0.305780359 0.307309478 0.314305642 0.316747828 0.317381707 0.322221979 0.329928657 0.332863846 0.351781248 0.352173608 0.355097965 0.355829496 0.360089915 0.362844440 0.364180208 0.384456481 0.386032078 0.392176573 0.410716393 0.425726850 0.430965318 0.462379938 0.468842225 0.478374559 0.483720601 0.484441943 0.487982843 0.491462368 0.509604114 0.515560238 0.535320065 0.569014632 0.575192643 0.592590804 0.594012411 0.606798667 0.608214431 0.644698694 0.647121693 0.649597072 0.674315627 0.678140760 0.685932188 0.691984423 0.693538659 0.700067085 0.704433192 0.717976937 0.741749584 0.751330124 0.759400917 0.769694151 0.773188617 0.778974164 0.810989347 0.815586881 0.819821764 0.822345096 0.823543630 0.831649650 0.834912891 0.836479884 0.842428799 0.845848564 0.847542672 0.849804629 0.859234464 0.865918728 0.867043989 0.874196217 0.885776857 0.886178424 0.889694614 0.899917845 0.901024422 0.904117174 0.923446715 0.927792108 0.935997051 0.937498571 0.966181931 0.976104179 0.986092134 1.001190109 1.019464412 1.028341249 1.042023666 1.050948634 1.057591575 1.068834484 1.086682781 1.088746466 1.104607439 1.107623810 1.112505719 1.124890833 1.135979548 1.138693052 1.144633899 1.175148532 1.179030839 1.181247052 1.186940044 1.191466625 1.196426709 1.224654008 1.228349603 1.275092507 1.302602625 1.320000928 1.328306855 1.333401076 1.336363059 1.336578236 1.342903859 1.343333686 1.345081140 1.359251278 1.378803346 1.382998073 1.385257854 1.415988284 1.420421694 1.436802705 1.551487192 1.681955197 1.776432653</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">246</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34264572" y3="0.03839832" z3="-0.19498251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38788811" y3="0.16344182" z3="0.41531873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64743125" y3="0.43682723" z3="-0.34264487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72517061" y3="1.23017642" z3="-2.25916257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38908215" y3="0.42195923" z3="-1.1855908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72587416" y3="0.83835252" z3="-3.65986632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62730485" y3="1.74207269" z3="-3.12810694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3691111" y3="2.58415894" z3="-4.59993312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55525191" y3="1.24179708" z3="-4.3681401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4880354" y3="2.91917016" z3="-5.15603972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92797032" y3="-0.49236367" z3="-3.44624281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1006238" y3="0.02677239" z3="-1.00423525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40505259" y3="-1.11330539" z3="-2.00886854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93335917" y3="-0.98480917" z3="-1.83506892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1079722" y3="-2.43783357" z3="-1.85943879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1402217" y3="-3.61282775" z3="0.67374439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02033807" y3="-5.26823357" z3="-4.73885211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24723106" y3="-5.00768862" z3="-3.70148937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84059302" y3="-4.31012707" z3="-1.08288088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77936886" y3="-4.5998525" z3="-2.85148238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56309775" y3="-5.09310449" z3="-3.24197955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86050898" y3="-4.73924666" z3="-1.92840134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49451362" y3="-4.26557018" z3="-1.52601328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81201336" y3="-4.52223592" z3="-3.19953546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36267605" y3="-5.40752055" z3="-3.91562525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89636766" y3="-4.7754307" z3="-1.58388195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02868641" y3="-3.85758968" z3="0.23680191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16867825" y3="-3.64070804" z3="0.88115747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05706654" y3="-4.10300695" z3="0.44853626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16435467" y3="-3.50047696" z3="2.34765503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22484518" y3="-3.30453454" z3="5.14471393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36219605" y3="-3.69759167" z3="3.05044239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99655022" y3="-3.21188838" z3="3.06962072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02410994" y3="-3.11458717" z3="4.45778136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39145847" y3="-3.60192739" z3="4.43888894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27750427" y3="-3.93583987" z3="2.50207338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03529084" y3="-3.08575432" z3="2.56571075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09460073" y3="-2.91041357" z3="4.99661853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33075674" y3="-3.76700361" z3="4.97355696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2459258" y3="-3.2364316" z3="6.23595365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41634226" y3="-3.89942327" z3="-0.62459849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17636338" y3="-3.40159278" z3="-1.08089442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51775899" y3="0.23476705" z3="-4.70970166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07472178" y3="-1.71503634" z3="0.01741546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89772547" y3="-0.95968065" z3="1.17580945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83492563" y3="-0.30912874" z3="1.50570224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35772697" y3="0.55947739" z3="1.20637556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42934275" y3="1.45012377" z3="-0.42506894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99105971" y3="-0.6983495" z3="1.39649145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34631292" y3="1.76141743" z3="2.64338722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87230908" y3="-0.94431927" z3="2.07397858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64262327" y3="-0.32482049" z3="3.32953978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19349889" y3="0.75445081" z3="-1.24857419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34946115" y3="2.23597461" z3="-0.42397332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40646396" y3="1.93790917" z3="-0.58903047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01564073" y3="-1.05799715" z3="2.43864546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96472361" y3="-0.23814552" z3="1.15894213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86706451" y3="-1.54315507" z3="0.69969189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40802014" y3="1.22910993" z3="3.60920543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59162843" y3="2.34596831" z3="2.64092935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18586048" y3="2.47690685" z3="2.58519706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78282811" y3="-0.78200051" z3="3.84518702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55870502" y3="-0.49245069" z3="3.91111545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46768261" y3="0.75622096" z3="3.20398041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84567794" y3="-0.72254973" z3="0.98613739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41438961" y3="-2.04746457" z3="0.8433058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76059045" y3="-2.69456895" z3="1.88448584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55589145" y3="-2.00410899" z3="3.07547811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0412739" y3="-0.71509695" z3="3.27538989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69407999" y3="-0.08123328" z3="2.22286679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51537144" y3="-2.54233843" z3="-0.12445906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35908756" y3="-3.70090322" z3="1.7572241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69252418" y3="-2.60304678" z3="4.09826397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86283833" y3="-0.20780296" z3="4.22416829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04124995" y3="0.94884841" z3="2.34159377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80017801" y3="0.45268036" z3="-4.28684267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77835528" y3="-0.51605324" z3="-4.46725093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42794359" y3="-1.70672175" z3="-5.09300894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14092875" y3="-1.93495193" z3="-5.56977564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83011985" y3="-0.9626467" z3="-5.36782903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0470912" y3="1.37471816" z3="-3.75412812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79774937" y3="-0.37205373" z3="-4.10830636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43791762" y3="-2.75758816" z3="-5.23398364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09164333" y3="-2.87431641" z3="-6.07180009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85236495" y3="-1.14627496" z3="-5.70252742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37001068" y3="-1.91151222" z3="5.0448521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30849512" y3="-3.74090881" z3="3.92538308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21234643" y3="-3.65912747" z3="-6.01252629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44087644" y3="-2.67387928" z3="-4.55314815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06850122" y3="1.16636755" z3="-1.48771722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10633223" y3="1.55489534" z3="-2.46495731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4354472" y3="1.50541898" z3="-1.68237381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84241263" y3="2.18084747" z3="-2.80705509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16272372" y3="1.20732688" z3="-0.9209275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89707851" y3="2.42941947" z3="-2.94894629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5634776" y3="2.23403604" z3="-3.62864532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89364248" y3="2.5386978" z3="-3.79473553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84124667" y3="2.50616637" z3="-4.40184111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22267702" y3="3.05434236" z3="-4.70110135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38931167" y3="3.14615953" z3="-3.31569119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27169167" y3="3.55811474" z3="-4.09985423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19199958" y3="4.1572023" z3="-2.71524143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93434391" y3="5.49047499" z3="-2.92946264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02237593" y3="3.86793084" z3="-2.06919208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56854464" y3="6.24493044" z3="-2.45719924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04054864" y3="4.94392632" z3="-4.31690081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85577148" y3="5.89388658" z3="-3.75183717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18755715" y3="5.24137981" z3="-4.9346602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66561194" y3="6.95775461" z3="-3.92143694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47403273" y3="-2.1909918" z3="-0.29999496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44608878" y3="-2.98600957" z3="-1.06438047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00341477" y3="-2.56904013" z3="0.58915295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08743891" y3="-1.37159036" z3="-0.72072776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17028538" y3="-1.42414307" z3="-1.15363211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30347308" y3="-0.38400762" z3="-1.50283987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09440657" y3="-1.55271055" z3="-0.94908091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41462083" y3="-2.0786667" z3="-2.00418648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3426,.0384,-.195;7.3879,.1634,.4153;6.6474,.4368,-.3426;4.7252,1.2302,-2.2592;4.3891,.422,-1.1856;2.7259,.8384,-3.6599;3.6273,1.7421,-3.1281;1.3691,2.5842,-4.5999;1.5553,1.2418,-4.3681;.488,2.9192,-5.156;2.928,-.4924,-3.4462;3.1006,.0268,-1.0042;2.4051,-1.1133,-2.0089;.9334,-.9848,-1.8351;3.108,-2.4378,-1.8594;-.1402,-3.6128,.6737;-.0203,-5.2682,-4.7389;-.2472,-5.0077,-3.7015;-.8406,-4.3101,-1.0829;.7794,-4.5999,-2.8515;-1.5631,-5.0931,-3.242;-1.8605,-4.7392,-1.9284;.4945,-4.2656,-1.526;1.812,-4.5222,-3.1995;-2.3627,-5.4075,-3.9156;-2.8964,-4.7754,-1.5839;-1.0287,-3.8576,.2368;-2.1687,-3.6407,.8812;-3.0571,-4.103,.4485;-2.1644,-3.5005,2.3477;-2.2248,-3.3045,5.1447;-3.3622,-3.6976,3.0504;-.9966,-3.2119,3.0696;-1.0241,-3.1146,4.4578;-3.3915,-3.6019,4.4389;-4.2775,-3.9358,2.5021;-.0353,-3.0858,2.5657;-.0946,-2.9104,4.9966;-4.3308,-3.767,4.9736;-2.2459,-3.2364,6.236;1.4163,-3.8994,-.6246;2.1764,-3.4016,-1.0809;.5178,.2348,-4.7097;-3.0747,-1.715,.0174;-2.8977,-.9597,1.1758;-1.8349,-.3091,1.5057;-.3577,.5595,1.2064;-.4293,1.4501,-.4251;.9911,-.6983,1.3965;-.3463,1.7614,2.6434;-3.8723,-.9443,2.074;-3.6426,-.3248,3.3295;-.1935,.7545,-1.2486;.3495,2.236,-.424;-1.4065,1.9379,-.589;1.0156,-1.058,2.4386;1.9647,-.2381,1.1589;.8671,-1.5432,.6997;-.408,1.2291,3.6092;.5916,2.346,2.6409;-1.1859,2.4769,2.5852;-2.7828,-.782,3.8452;-4.5587,-.4925,3.9111;-3.4677,.7562,3.204;4.8457,-.7225,.9861;4.4144,-2.0475,.8433;3.7606,-2.6946,1.8845;3.5559,-2.0041,3.0755;4.0413,-.7151,3.2754;4.6941,-.0812,2.2229;4.5154,-2.5423,-.1245;3.3591,-3.7009,1.7572;2.6925,-2.603,4.0983;3.8628,-.2078,4.2242;5.0412,.9488,2.3416;-.8002,.4527,-4.2868;-1.7784,-.5161,-4.4673;-1.4279,-1.7067,-5.093;-.1409,-1.935,-5.5698;.8301,-.9626,-5.3678;-1.0471,1.3747,-3.7541;-2.7977,-.3721,-4.1083;-2.4379,-2.7576,-5.234;.0916,-2.8743,-6.0718;1.8524,-1.1463,-5.7025;2.37,-1.9115,5.0449;2.3085,-3.7409,3.9254;-2.2123,-3.6591,-6.0125;-3.4409,-2.6739,-4.5531;7.0685,1.1664,-1.4877;6.1063,1.5549,-2.465;8.4354,1.5054,-1.6824;8.8424,2.1808,-2.8071;9.1627,1.2073,-.9209;9.8971,2.4294,-2.9489;6.5635,2.234,-3.6286;7.8936,2.5387,-3.7947;5.8412,2.5062,-4.4018;8.2227,3.0543,-4.7011;3.3893,3.1462,-3.3157;2.2717,3.5581,-4.0999;4.192,4.1572,-2.7152;3.9343,5.4905,-2.9295;5.0224,3.8679,-2.0692;4.5685,6.2449,-2.4572;2.0405,4.9439,-4.3169;2.8558,5.8939,-3.7518;1.1876,5.2414,-4.9347;2.6656,6.9578,-3.9214;-4.474,-2.191,-.3;-4.4461,-2.986,-1.0644;-5.0034,-2.569,.5892;-5.0874,-1.3716,-.7207;-2.1703,-1.4241,-1.1536;-2.3035,-.384,-1.5028;-1.0944,-1.5527,-.9491;-2.4146,-2.0787,-2.0042;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416918841</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001494934212 0.000251346712 0.018847047527 0.005350768928</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030685122 -0.000540140 0.000052466 0.000117363 0.000168733 0.000301790 0.000357515 0.000442501 0.000596898 0.000815787 0.000932568 0.001059310 0.001199073 0.001334155 0.001372012 0.001403159 0.001564676 0.001791610 0.001830182 0.001947364 0.002165179 0.002345925 0.002577084 0.002669688 0.002689965 0.003015356 0.003119002 0.003424866 0.003514832 0.003904854 0.004451887 0.004710477 0.004771420 0.005082371 0.005989706 0.006109585 0.006184498 0.006644321 0.006954179 0.007742193 0.008106273 0.008227619 0.009310640 0.009516681 0.010025775 0.010572786 0.010733441 0.011029933 0.011795721 0.012254709 0.012946841 0.013111916 0.014057842 0.014576508 0.015195865 0.015518224 0.015781152 0.016318478 0.016992805 0.017483902 0.018134271 0.018535866 0.019434757 0.019596647 0.020043343 0.020806255 0.021223275 0.021403555 0.022599256 0.023154923 0.025058549 0.026295686 0.026791598 0.027593377 0.027747509 0.029503145 0.029778505 0.031543569 0.033296767 0.033593311 0.033965128 0.035791251 0.036907202 0.037715044 0.039584366 0.040057867 0.040848537 0.042346316 0.044246105 0.045172142 0.045430585 0.047110166 0.047901219 0.049242916 0.050424072 0.050989071 0.051218245 0.051440485 0.052483164 0.052686818 0.052919084 0.053112601 0.054722714 0.054943570 0.056009518 0.056273004 0.056527740 0.056689722 0.057196263 0.059055100 0.060471580 0.060919378 0.061705041 0.062339093 0.063309160 0.064519833 0.065356663 0.066028270 0.066539627 0.068304211 0.069079567 0.070261942 0.072735324 0.074500208 0.074785337 0.076326149 0.078449801 0.084051370 0.086534841 0.087108014 0.087594228 0.088883733 0.090544041 0.091168807 0.093703195 0.094659554 0.095482785 0.096420392 0.097848361 0.098821515 0.099215388 0.100176470 0.100834670 0.102455778 0.103208072 0.103524406 0.104105654 0.104473299 0.106320978 0.106950459 0.107951039 0.109763923 0.110939051 0.112223139 0.112862607 0.115017791 0.116179235 0.116708371 0.118699230 0.120754356 0.121645916 0.123113564 0.124407658 0.125581524 0.126228332 0.126633733 0.127147253 0.132038639 0.135078445 0.135808205 0.142788004 0.143740346 0.147056722 0.147593765 0.149729946 0.152792389 0.154666745 0.156258038 0.156758040 0.161534788 0.161894199 0.173742894 0.174202454 0.180475406 0.184791250 0.186250500 0.189607449 0.190394725 0.194114681 0.194819455 0.198509284 0.200267312 0.205239818 0.206921533 0.207349603 0.210227935 0.215260340 0.216634673 0.217894813 0.219133943 0.220786959 0.225279371 0.226605746 0.232152107 0.235114958 0.235601524 0.235970974 0.244624422 0.256021229 0.257254757 0.263714843 0.269919655 0.280372617 0.283282750 0.286326459 0.291827646 0.296781016 0.304386655 0.305781468 0.307314477 0.314309295 0.316748579 0.317383218 0.322221993 0.329934245 0.332864931 0.351781475 0.352181678 0.355103781 0.355834495 0.360071320 0.362844489 0.364186308 0.384451906 0.386032560 0.392178846 0.410715673 0.425735810 0.430953703 0.462378163 0.468840899 0.478381005 0.483721932 0.484433000 0.487979214 0.491471837 0.509611985 0.515575481 0.535322631 0.569041795 0.575199870 0.592572716 0.594024613 0.606871747 0.608227540 0.644682951 0.647142039 0.649635217 0.674319460 0.678174670 0.685935827 0.691990110 0.693558193 0.700066491 0.704434441 0.717988554 0.741795727 0.751331067 0.759405242 0.769704273 0.773190733 0.779006845 0.810991704 0.815582423 0.819857987 0.822391255 0.823545196 0.831646941 0.834912131 0.836533820 0.842432330 0.845849599 0.847545502 0.849821249 0.859242517 0.865919250 0.867044186 0.874200314 0.885815143 0.886198175 0.889694670 0.899915492 0.901022791 0.904119292 0.923454152 0.927830693 0.936066615 0.937492614 0.966186810 0.976107917 0.986095187 1.001200303 1.019519822 1.028343407 1.042036303 1.050949680 1.057593950 1.068847738 1.086683857 1.088748343 1.104609469 1.107678715 1.112507171 1.124901194 1.135979995 1.138904836 1.144647556 1.175218802 1.179034556 1.181249859 1.186944122 1.191468854 1.196435818 1.224653624 1.228351748 1.275061231 1.302607751 1.320027504 1.328310689 1.333393296 1.336375118 1.336603463 1.342893531 1.343373427 1.345080669 1.359258644 1.378807835 1.382998657 1.385271291 1.415952123 1.420429087 1.436731261 1.551487250 1.681992213 1.776422512</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">247</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34401584" y3="0.03267327" z3="-0.19659663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38902862" y3="0.16132068" z3="0.41413814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64792357" y3="0.434305" z3="-0.34339611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72387932" y3="1.22801398" z3="-2.25804049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38952071" y3="0.41634215" z3="-1.18638102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72447643" y3="0.83739324" z3="-3.65874424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6250913" y3="1.74046891" z3="-3.12539297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36713803" y3="2.58169372" z3="-4.59735743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55364439" y3="1.24040223" z3="-4.36718697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48571992" y3="2.91691233" z3="-5.15283294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9281416" y3="-0.49362556" z3="-3.44834622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10174533" y3="0.01856842" z3="-1.00511001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40554477" y3="-1.11867188" z3="-2.01261676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93396812" y3="-0.98993315" z3="-1.83797629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10767801" y3="-2.44410095" z3="-1.86712545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13875099" y3="-3.61295226" z3="0.67334013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02738812" y3="-5.27462563" z3="-4.73804052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25239954" y3="-5.01390755" z3="-3.70038244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8418719" y3="-4.31303955" z3="-1.08144999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77491886" y3="-4.60477259" z3="-2.85251322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56690327" y3="-5.09983929" z3="-3.23839743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8623011" y3="-4.74416394" z3="-1.92464866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49246279" y3="-4.26928816" z3="-1.52679686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80715297" y3="-4.52778334" z3="-3.20231424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3691181" y3="-5.41301445" z3="-3.91075928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89851462" y3="-4.77816592" z3="-1.57831653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02828077" y3="-3.8575804" z3="0.23762472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16749243" y3="-3.63859994" z3="0.88240573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.056475" y3="-4.10100199" z3="0.45126346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16255269" y3="-3.4949945" z3="2.34849112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22209236" y3="-3.29249575" z3="5.14508021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36040547" y3="-3.68915391" z3="3.05198008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99439793" y3="-3.20595277" z3="3.06942756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02141065" y3="-3.10559748" z3="4.45745042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38945366" y3="-3.58978828" z3="4.44016452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27651433" y3="-3.92700293" z3="2.50427111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03410359" y3="-3.08060635" z3="2.5650246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09106152" y3="-2.90235652" z3="4.99577507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32922206" y3="-3.75176805" z3="4.97544905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24295417" y3="-3.22152918" z3="6.23615964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41710225" y3="-3.90347519" z3="-0.62722239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1767751" y3="-3.40725924" z3="-1.08559084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5172203" y3="0.2331797" z3="-4.71079589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07156717" y3="-1.71389976" z3="0.01454619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89518553" y3="-0.9567922" z3="1.17175426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83229004" y3="-0.3069561" z3="1.50214899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35575755" y3="0.56336789" z3="1.20346031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42490434" y3="1.44924515" z3="-0.43069551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99450815" y3="-0.69231271" z3="1.39878198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34918914" y3="1.76958017" z3="2.6369405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.871022" y3="-0.93890523" z3="2.06863259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64234603" y3="-0.31610743" z3="3.3229009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18637783" y3="0.75125713" z3="-1.25146559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35209923" y3="2.23636962" z3="-0.43027719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40238403" y3="1.93554171" z3="-0.59827981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01803012" y3="-1.05028771" z3="2.44165266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96992673" y3="-0.2333016" z3="1.16179729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87169166" y3="-1.53913484" z3="0.70396217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41116978" y3="1.24055811" z3="3.60430734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58769066" y3="2.35616983" z3="2.6340015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19025525" y3="2.48286519" z3="2.57520023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78257308" y3="-0.77110017" z3="3.8402807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5588044" y3="-0.48232924" z3="3.90499782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46784666" y3="0.76457978" z3="3.1944875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84817523" y3="-0.73039315" z3="0.98355652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41056576" y3="-2.05303144" z3="0.83795425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7572782" y3="-2.70034033" z3="1.87933273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55925088" y3="-2.01261758" z3="3.07315297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05093863" y3="-0.72652288" z3="3.27532639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.7036117" y3="-0.09239037" z3="2.22292548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50735763" y3="-2.54582047" z3="-0.13096325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35172089" y3="-3.70456607" z3="1.75068005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69627012" y3="-2.6107253" z3="4.09676626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87752158" y3="-0.2212943" z3="4.22598517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05616465" y3="0.93572987" z3="2.34405717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80129177" y3="0.44938256" z3="-4.28809977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.778429" y3="-0.52048364" z3="-4.46956125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42644397" y3="-1.71048874" z3="-5.09536501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13878287" y3="-1.93672511" z3="-5.57211472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83107146" y3="-0.96347793" z3="-5.36961727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04931215" y3="1.37081641" z3="-3.75525675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79797268" y3="-0.37770958" z3="-4.11041045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43518594" y3="-2.76280762" z3="-5.23723173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09458953" y3="-2.87553345" z3="-6.07429474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85363002" y3="-1.14585049" z3="-5.70405185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38134332" y3="-1.92145301" z3="5.04718657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30382652" y3="-3.74546495" z3="3.91968755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20839804" y3="-3.66353418" z3="-6.01652759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43822848" y3="-2.68071799" z3="-4.55672624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06736868" y3="1.16716583" z3="-1.4869376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10440092" y3="1.55602521" z3="-2.46320987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43345039" y3="1.50980806" z3="-1.68062735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83864163" y3="2.18806304" z3="-2.80372465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16151607" y3="1.21264719" z3="-0.91944227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.893276" y3="2.44340912" z3="-2.94376419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56000445" y3="2.2388219" z3="-3.62522989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88897918" y3="2.54560606" z3="-3.79070552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83722421" y3="2.51136134" z3="-4.39776929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21675468" y3="3.06584559" z3="-4.6953477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38564674" y3="3.14426055" z3="-3.30974389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26709889" y3="3.55702598" z3="-4.09211319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18660589" y3="4.15470494" z3="-2.70629551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92664504" y3="5.48780442" z3="-2.91678338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01696981" y3="3.86538676" z3="-2.06032363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55690477" y3="6.24445058" z3="-2.43835219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03172725" y3="4.94450466" z3="-4.30261882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.846797" y3="5.89232821" z3="-3.73712609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17790025" y3="5.2424888" z3="-4.91906122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.65605246" y3="6.95560124" z3="-3.90445595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47075514" y3="-2.18943911" z3="-0.30329005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44259252" y3="-2.98618419" z3="-1.06606122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00185367" y3="-2.56515833" z3="0.58628845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08216614" y3="-1.36980756" z3="-0.7261923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16583697" y3="-1.42597461" z3="-1.1561632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29624253" y3="-0.38528716" z3="-1.50654997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09004277" y3="-1.55601813" z3="-0.9502782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40884013" y3="-2.08138874" z3="-2.00539964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.344,.0327,-.1966;7.389,.1613,.4141;6.6479,.4343,-.3434;4.7239,1.228,-2.258;4.3895,.4163,-1.1864;2.7245,.8374,-3.6587;3.6251,1.7405,-3.1254;1.3671,2.5817,-4.5974;1.5536,1.2404,-4.3672;.4857,2.9169,-5.1528;2.9281,-.4936,-3.4483;3.1017,.0186,-1.0051;2.4055,-1.1187,-2.0126;.934,-.9899,-1.838;3.1077,-2.4441,-1.8671;-.1388,-3.613,.6733;-.0274,-5.2746,-4.738;-.2524,-5.0139,-3.7004;-.8419,-4.313,-1.0814;.7749,-4.6048,-2.8525;-1.5669,-5.0998,-3.2384;-1.8623,-4.7442,-1.9246;.4925,-4.2693,-1.5268;1.8072,-4.5278,-3.2023;-2.3691,-5.413,-3.9108;-2.8985,-4.7782,-1.5783;-1.0283,-3.8576,.2376;-2.1675,-3.6386,.8824;-3.0565,-4.101,.4513;-2.1626,-3.495,2.3485;-2.2221,-3.2925,5.1451;-3.3604,-3.6892,3.052;-.9944,-3.206,3.0694;-1.0214,-3.1056,4.4575;-3.3895,-3.5898,4.4402;-4.2765,-3.927,2.5043;-.0341,-3.0806,2.565;-.0911,-2.9024,4.9958;-4.3292,-3.7518,4.9754;-2.243,-3.2215,6.2362;1.4171,-3.9035,-.6272;2.1768,-3.4073,-1.0856;.5172,.2332,-4.7108;-3.0716,-1.7139,.0145;-2.8952,-.9568,1.1718;-1.8323,-.307,1.5021;-.3558,.5634,1.2035;-.4249,1.4492,-.4307;.9945,-.6923,1.3988;-.3492,1.7696,2.6369;-3.871,-.9389,2.0686;-3.6423,-.3161,3.3229;-.1864,.7513,-1.2515;.3521,2.2364,-.4303;-1.4024,1.9355,-.5983;1.018,-1.0503,2.4417;1.9699,-.2333,1.1618;.8717,-1.5391,.704;-.4112,1.2406,3.6043;.5877,2.3562,2.634;-1.1903,2.4829,2.5752;-2.7826,-.7711,3.8403;-4.5588,-.4823,3.905;-3.4678,.7646,3.1945;4.8482,-.7304,.9836;4.4106,-2.053,.838;3.7573,-2.7003,1.8793;3.5593,-2.0126,3.0732;4.0509,-.7265,3.2753;4.7036,-.0924,2.2229;4.5074,-2.5458,-.131;3.3517,-3.7046,1.7507;2.6963,-2.6107,4.0968;3.8775,-.2213,4.226;5.0562,.9357,2.3441;-.8013,.4494,-4.2881;-1.7784,-.5205,-4.4696;-1.4264,-1.7105,-5.0954;-.1388,-1.9367,-5.5721;.8311,-.9635,-5.3696;-1.0493,1.3708,-3.7553;-2.798,-.3777,-4.1104;-2.4352,-2.7628,-5.2372;.0946,-2.8755,-6.0743;1.8536,-1.1459,-5.7041;2.3813,-1.9215,5.0472;2.3038,-3.7455,3.9197;-2.2084,-3.6635,-6.0165;-3.4382,-2.6807,-4.5567;7.0674,1.1672,-1.4869;6.1044,1.556,-2.4632;8.4335,1.5098,-1.6806;8.8386,2.1881,-2.8037;9.1615,1.2126,-.9194;9.8933,2.4434,-2.9438;6.56,2.2388,-3.6252;7.889,2.5456,-3.7907;5.8372,2.5114,-4.3978;8.2168,3.0658,-4.6953;3.3856,3.1443,-3.3097;2.2671,3.557,-4.0921;4.1866,4.1547,-2.7063;3.9266,5.4878,-2.9168;5.017,3.8654,-2.0603;4.5569,6.2445,-2.4384;2.0317,4.9445,-4.3026;2.8468,5.8923,-3.7371;1.1779,5.2425,-4.9191;2.6561,6.9556,-3.9045;-4.4708,-2.1894,-.3033;-4.4426,-2.9862,-1.0661;-5.0019,-2.5652,.5863;-5.0822,-1.3698,-.7262;-2.1658,-1.426,-1.1562;-2.2962,-.3853,-1.5065;-1.09,-1.556,-.9503;-2.4088,-2.0814,-2.0054;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650407538915</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001506334530 0.000294310422 0.017428336009 0.005326625233</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030685153 -0.000400795 0.000073562 0.000127523 0.000200458 0.000304850 0.000354637 0.000442463 0.000598993 0.000815330 0.000932962 0.001059922 0.001201036 0.001333888 0.001373106 0.001403121 0.001565161 0.001791588 0.001831198 0.001947390 0.002166061 0.002345756 0.002576642 0.002669695 0.002689275 0.003015329 0.003118658 0.003426269 0.003515998 0.003904825 0.004451686 0.004712578 0.004771207 0.005082274 0.005989452 0.006110285 0.006184452 0.006644341 0.006953880 0.007742207 0.008106277 0.008228678 0.009311492 0.009516950 0.010025905 0.010573330 0.010734061 0.011033110 0.011803059 0.012254594 0.012946962 0.013112489 0.014057768 0.014577369 0.015213733 0.015518199 0.015793253 0.016318347 0.016993225 0.017487593 0.018137275 0.018540696 0.019439989 0.019597352 0.020043376 0.020806965 0.021223408 0.021404106 0.022599603 0.023154988 0.025062770 0.026295357 0.026791643 0.027627028 0.027757838 0.029510047 0.029838412 0.031556269 0.033296752 0.033597396 0.033969737 0.035792076 0.036907478 0.037717054 0.039586355 0.040057962 0.040848545 0.042346739 0.044249535 0.045171901 0.045430522 0.047114221 0.047919710 0.049243629 0.050429597 0.050989309 0.051220142 0.051448663 0.052483146 0.052687997 0.052920015 0.053112634 0.054724088 0.054944098 0.056012347 0.056273291 0.056527553 0.056692512 0.057199830 0.059059393 0.060477391 0.060921155 0.061705377 0.062346370 0.063309466 0.064521828 0.065356693 0.066042334 0.066541053 0.068309290 0.069084152 0.070265083 0.072735851 0.074500992 0.074787480 0.076326067 0.078453761 0.084054037 0.086536341 0.087108095 0.087601115 0.088884658 0.090545030 0.091195684 0.093745124 0.094672968 0.095508994 0.096420687 0.097848681 0.098825483 0.099234882 0.100179168 0.100838371 0.102457094 0.103208080 0.103546069 0.104129870 0.104474342 0.106321275 0.106950467 0.107971056 0.109767580 0.110941740 0.112232513 0.112889195 0.115026692 0.116181622 0.116715238 0.118704047 0.120756035 0.121682796 0.123119087 0.124409253 0.125611907 0.126228382 0.126633466 0.127156939 0.132038577 0.135078141 0.135809101 0.142787804 0.143741849 0.147059333 0.147594309 0.149729022 0.152805120 0.154668238 0.156257929 0.156756674 0.161536600 0.161896410 0.173748860 0.174210872 0.180534787 0.184805901 0.186262829 0.189610802 0.190394750 0.194115323 0.194854315 0.198524904 0.200271587 0.205245008 0.206921541 0.207354403 0.210228447 0.215274794 0.216652531 0.217897360 0.219141029 0.220789849 0.225279390 0.226616412 0.232154478 0.235115093 0.235606814 0.235971135 0.244627602 0.256023856 0.257254754 0.263714924 0.269919517 0.280372619 0.283298180 0.286329696 0.291834506 0.296784958 0.304387254 0.305782274 0.307322368 0.314314859 0.316748562 0.317386637 0.322223307 0.329943430 0.332865283 0.351781792 0.352186095 0.355104412 0.355844718 0.360072043 0.362850652 0.364193276 0.384452462 0.386038207 0.392178500 0.410717917 0.425754014 0.430955295 0.462378577 0.468840856 0.478386115 0.483728221 0.484439192 0.487979291 0.491478602 0.509616908 0.515584404 0.535325088 0.569068715 0.575203798 0.592576342 0.594040185 0.606962808 0.608246433 0.644683336 0.647173349 0.649662897 0.674334573 0.678219465 0.685945185 0.691993743 0.693564322 0.700070310 0.704437103 0.718013717 0.741852267 0.751331079 0.759405554 0.769704290 0.773192538 0.779061013 0.810992335 0.815585543 0.819871621 0.822451533 0.823546286 0.831648280 0.834915751 0.836647760 0.842433090 0.845849687 0.847548674 0.849837750 0.859248523 0.865919474 0.867044997 0.874203135 0.885849574 0.886224753 0.889695310 0.899920082 0.901024181 0.904122731 0.923469798 0.927885114 0.936163233 0.937496997 0.966189246 0.976112203 0.986098143 1.001224826 1.019612733 1.028343439 1.042048632 1.050954142 1.057604214 1.068851074 1.086683845 1.088750053 1.104613167 1.107777812 1.112507209 1.124904073 1.135980527 1.139000717 1.144648006 1.175374652 1.179035443 1.181249872 1.186949294 1.191474638 1.196449359 1.224656136 1.228352831 1.275059321 1.302611241 1.320087927 1.328316613 1.333401459 1.336417553 1.336698144 1.342893936 1.343399736 1.345080871 1.359269519 1.378814735 1.382998630 1.385279549 1.415995547 1.420431225 1.436731358 1.551487936 1.682027112 1.776431899</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">248</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34269159" y3="0.02890793" z3="-0.19511469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38724405" y3="0.15992321" z3="0.41582518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6458951" y3="0.43280314" z3="-0.3414469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72081954" y3="1.22533787" z3="-2.25532629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38780914" y3="0.41190268" z3="-1.18486108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72258658" y3="0.83277949" z3="-3.65773571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62106922" y3="1.73706695" z3="-3.12203496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36032821" y3="2.5785119" z3="-4.59041199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55098471" y3="1.23550578" z3="-4.36483738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47856174" y3="2.91302032" z3="-5.14571436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92832262" y3="-0.49805004" z3="-3.44877495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10075992" y3="0.01195199" z3="-1.00488423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40631038" y3="-1.12495347" z3="-2.01372632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93458381" y3="-0.9978896" z3="-1.83871714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10968064" y3="-2.44969792" z3="-1.86935448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13872496" y3="-3.60919137" z3="0.66890851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03074366" y3="-5.28276619" z3="-4.73865269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25550652" y3="-5.01863139" z3="-3.70174524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84333294" y3="-4.31109423" z3="-1.08433707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7733532" y3="-4.61158798" z3="-2.85416252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57100562" y3="-5.09869253" z3="-3.24017498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86561444" y3="-4.73977618" z3="-1.92728582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49137275" y3="-4.27265171" z3="-1.52927849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80594379" y3="-4.5385639" z3="-3.203753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37267972" y3="-5.41227084" z3="-3.91192293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90113739" y3="-4.77180962" z3="-1.58131944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02856652" y3="-3.8533396" z3="0.23400735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16728207" y3="-3.63239696" z3="0.87944997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05712195" y3="-4.09450117" z3="0.4494897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16078537" y3="-3.48856401" z3="2.34565637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21698989" y3="-3.28726764" z3="5.14250947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35833611" y3="-3.68095595" z3="3.05027419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99133469" y3="-3.2016228" z3="3.06564154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01678088" y3="-3.10181066" z3="4.45374288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38553108" y3="-3.58242103" z3="4.43860188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27508737" y3="-3.91773397" z3="2.50343491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03046671" y3="-3.07906488" z3="2.5601923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08612124" y3="-2.89983823" z3="4.99145133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32458584" y3="-3.74384857" z3="4.9746866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23625745" y3="-3.2172725" z3="6.23371462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4161713" y3="-3.90790199" z3="-0.63012692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17685651" y3="-3.41349847" z3="-1.08863688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51644849" y3="0.22717864" z3="-4.71071976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0705874" y3="-1.70787798" z3="0.01268093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89083936" y3="-0.95008733" z3="1.16906543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82587328" y3="-0.30228171" z3="1.49646876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34903924" y3="0.56791374" z3="1.19944843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41488877" y3="1.45027586" z3="-0.43675312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99988715" y3="-0.68846041" z3="1.39970498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34506821" y3="1.77674508" z3="2.63055833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86468139" y3="-0.92990177" z3="2.06794168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63266363" y3="-0.30762402" z3="3.32154848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17824353" y3="0.74942456" z3="-1.25566873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3642584" y3="2.23548593" z3="-0.43836383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39117861" y3="1.93780963" z3="-0.60594862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0193726" y3="-1.04718663" z3="2.44226877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97498964" y3="-0.22904354" z3="1.16606705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87869146" y3="-1.53403016" z3="0.70319153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40835591" y3="1.24941428" z3="3.59882167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59134788" y3="2.36372819" z3="2.62797099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18617939" y3="2.48983376" z3="2.56629375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77261041" y3="-0.76420343" z3="3.83701343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54798114" y3="-0.47304225" z3="3.90483907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45688957" y3="0.772957" z3="3.19297464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84837195" y3="-0.73515804" z3="0.98501488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40928254" y3="-2.05710402" z3="0.83890051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75643846" y3="-2.70485375" z3="1.88019998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56103228" y3="-2.01836477" z3="3.07492044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05548239" y3="-0.73335832" z3="3.27831603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70687302" y3="-0.0986937" z3="2.22537972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50386715" y3="-2.54889711" z3="-0.13087386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34866808" y3="-3.70837249" z3="1.75044905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69871089" y3="-2.61659723" z3="4.09897512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88529381" y3="-0.22948097" z3="4.23058444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.06065002" y3="0.92877053" z3="2.34701037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80298323" y3="0.44210531" z3="-4.29079217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77891615" y3="-0.52823491" z3="-4.47534734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42467688" y3="-1.71754124" z3="-5.10107488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13603901" y3="-1.94263638" z3="-5.5750477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83254463" y3="-0.96871178" z3="-5.37020053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05299272" y3="1.36290192" z3="-3.75764015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79942767" y3="-0.38656967" z3="-4.11866348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43219183" y3="-2.77032979" z3="-5.24487358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09952895" y3="-2.88101587" z3="-6.07736083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85584177" y3="-1.14993158" z3="-5.70281423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38584306" y3="-1.9278783" z3="5.0506137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30565589" y3="-3.75070185" z3="3.92206338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20268213" y3="-3.67142129" z3="-6.02278718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43722393" y3="-2.68866875" z3="-4.56683372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06432042" y3="1.16807226" z3="-1.48386205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10072705" y3="1.55664783" z3="-2.45965371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42989282" y3="1.51371018" z3="-1.67695402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83408933" y3="2.1955946" z3="-2.79874658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15836404" y3="1.21564211" z3="-0.91660972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88773727" y3="2.44959028" z3="-2.93938573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55514212" y3="2.24296555" z3="-3.62034183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88394335" y3="2.55366375" z3="-3.78502318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83178242" y3="2.51527647" z3="-4.39243814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21085816" y3="3.07462424" z3="-4.6891112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37788608" y3="3.1413899" z3="-3.3026286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25909011" y3="3.55308098" z3="-4.08523263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17619921" y3="4.15263748" z3="-2.69625288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9131249" y3="5.48599875" z3="-2.90312912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00765635" y3="3.86319826" z3="-2.05164692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54407294" y3="6.24040962" z3="-2.42653981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02263911" y3="4.93891543" z3="-4.2951099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83332453" y3="5.88936857" z3="-3.72384815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16863985" y3="5.23629698" z3="-4.91153018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63862412" y3="6.95340867" z3="-3.88734631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47106328" y3="-2.18127324" z3="-0.30255673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44534859" y3="-2.9788812" z3="-1.06430702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00124682" y3="-2.55526691" z3="0.58794257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08211377" y3="-1.36150916" z3="-0.72575816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16626266" y3="-1.42168094" z3="-1.1593632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29694426" y3="-0.38165526" z3="-1.5108827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09069674" y3="-1.5520112" z3="-0.95450378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41199425" y3="-2.07787676" z3="-2.00799173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3427,.0289,-.1951;7.3872,.1599,.4158;6.6459,.4328,-.3414;4.7208,1.2253,-2.2553;4.3878,.4119,-1.1849;2.7226,.8328,-3.6577;3.6211,1.7371,-3.122;1.3603,2.5785,-4.5904;1.551,1.2355,-4.3648;.4786,2.913,-5.1457;2.9283,-.4981,-3.4488;3.1008,.012,-1.0049;2.4063,-1.125,-2.0137;.9346,-.9979,-1.8387;3.1097,-2.4497,-1.8694;-.1387,-3.6092,.6689;-.0307,-5.2828,-4.7387;-.2555,-5.0186,-3.7017;-.8433,-4.3111,-1.0843;.7734,-4.6116,-2.8542;-1.571,-5.0987,-3.2402;-1.8656,-4.7398,-1.9273;.4914,-4.2727,-1.5293;1.8059,-4.5386,-3.2038;-2.3727,-5.4123,-3.9119;-2.9011,-4.7718,-1.5813;-1.0286,-3.8533,.234;-2.1673,-3.6324,.8794;-3.0571,-4.0945,.4495;-2.1608,-3.4886,2.3457;-2.217,-3.2873,5.1425;-3.3583,-3.681,3.0503;-.9913,-3.2016,3.0656;-1.0168,-3.1018,4.4537;-3.3855,-3.5824,4.4386;-4.2751,-3.9177,2.5034;-.0305,-3.0791,2.5602;-.0861,-2.8998,4.9915;-4.3246,-3.7438,4.9747;-2.2363,-3.2173,6.2337;1.4162,-3.9079,-.6301;2.1769,-3.4135,-1.0886;.5164,.2272,-4.7107;-3.0706,-1.7079,.0127;-2.8908,-.9501,1.1691;-1.8259,-.3023,1.4965;-.349,.5679,1.1994;-.4149,1.4503,-.4368;.9999,-.6885,1.3997;-.3451,1.7767,2.6306;-3.8647,-.9299,2.0679;-3.6327,-.3076,3.3215;-.1782,.7494,-1.2557;.3643,2.2355,-.4384;-1.3912,1.9378,-.6059;1.0194,-1.0472,2.4423;1.975,-.229,1.1661;.8787,-1.534,.7032;-.4084,1.2494,3.5988;.5913,2.3637,2.628;-1.1862,2.4898,2.5663;-2.7726,-.7642,3.837;-4.548,-.473,3.9048;-3.4569,.773,3.193;4.8484,-.7352,.985;4.4093,-2.0571,.8389;3.7564,-2.7049,1.8802;3.561,-2.0184,3.0749;4.0555,-.7334,3.2783;4.7069,-.0987,2.2254;4.5039,-2.5489,-.1309;3.3487,-3.7084,1.7504;2.6987,-2.6166,4.099;3.8853,-.2295,4.2306;5.0607,.9288,2.347;-.803,.4421,-4.2908;-1.7789,-.5282,-4.4753;-1.4247,-1.7175,-5.1011;-.136,-1.9426,-5.575;.8325,-.9687,-5.3702;-1.053,1.3629,-3.7576;-2.7994,-.3866,-4.1187;-2.4322,-2.7703,-5.2449;.0995,-2.881,-6.0774;1.8558,-1.1499,-5.7028;2.3858,-1.9279,5.0506;2.3057,-3.7507,3.9221;-2.2027,-3.6714,-6.0228;-3.4372,-2.6887,-4.5668;7.0643,1.1681,-1.4839;6.1007,1.5566,-2.4597;8.4299,1.5137,-1.677;8.8341,2.1956,-2.7987;9.1584,1.2156,-.9166;9.8877,2.4496,-2.9394;6.5551,2.243,-3.6203;7.8839,2.5537,-3.785;5.8318,2.5153,-4.3924;8.2109,3.0746,-4.6891;3.3779,3.1414,-3.3026;2.2591,3.5531,-4.0852;4.1762,4.1526,-2.6963;3.9131,5.486,-2.9031;5.0077,3.8632,-2.0516;4.5441,6.2404,-2.4265;2.0226,4.9389,-4.2951;2.8333,5.8894,-3.7238;1.1686,5.2363,-4.9115;2.6386,6.9534,-3.8873;-4.4711,-2.1813,-.3026;-4.4453,-2.9789,-1.0643;-5.0012,-2.5553,.5879;-5.0821,-1.3615,-.7258;-2.1663,-1.4217,-1.1594;-2.2969,-.3817,-1.5109;-1.0907,-1.552,-.9545;-2.412,-2.0779,-2.008;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650403908059</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001268737240 0.000269320359 0.019152831700 0.005341228138</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030685389 -0.000469501 0.000076765 0.000118272 0.000188275 0.000303934 0.000355342 0.000442189 0.000594172 0.000817162 0.000932085 0.001059511 0.001206936 0.001333847 0.001371641 0.001403329 0.001564669 0.001791646 0.001831391 0.001947577 0.002165150 0.002345808 0.002576886 0.002669794 0.002689602 0.003015448 0.003117833 0.003425436 0.003515730 0.003904291 0.004451754 0.004714700 0.004771050 0.005082328 0.005989324 0.006112876 0.006185744 0.006644398 0.006954112 0.007742133 0.008106260 0.008228287 0.009311398 0.009517157 0.010026125 0.010573228 0.010734259 0.011041992 0.011810250 0.012254926 0.012947329 0.013111870 0.014058632 0.014577665 0.015237657 0.015518671 0.015808586 0.016319068 0.016995319 0.017488736 0.018139689 0.018545588 0.019446827 0.019597282 0.020044256 0.020808572 0.021223489 0.021405857 0.022599555 0.023155221 0.025063745 0.026295743 0.026791475 0.027646465 0.027770834 0.029515294 0.029912297 0.031569329 0.033296840 0.033602544 0.033975048 0.035792612 0.036908667 0.037717482 0.039585811 0.040058709 0.040848426 0.042346867 0.044250749 0.045171943 0.045431362 0.047116883 0.047934598 0.049244075 0.050437053 0.050989731 0.051222662 0.051458811 0.052483145 0.052688861 0.052920697 0.053113258 0.054726191 0.054944405 0.056013797 0.056273504 0.056527493 0.056696347 0.057203267 0.059064938 0.060481731 0.060921251 0.061705308 0.062351373 0.063309448 0.064522766 0.065356594 0.066051401 0.066542615 0.068315130 0.069085226 0.070268087 0.072736696 0.074500881 0.074789693 0.076326152 0.078456664 0.084055669 0.086538009 0.087108186 0.087605266 0.088887054 0.090547974 0.091218678 0.093777451 0.094685994 0.095546264 0.096420664 0.097848615 0.098830304 0.099246856 0.100180298 0.100839130 0.102456859 0.103208127 0.103559978 0.104158597 0.104481509 0.106321019 0.106950466 0.107994993 0.109767927 0.110941895 0.112241249 0.112924124 0.115031428 0.116183498 0.116725971 0.118705841 0.120758245 0.121736925 0.123125228 0.124409153 0.125644663 0.126228306 0.126633323 0.127160685 0.132038634 0.135077684 0.135810048 0.142787320 0.143743438 0.147061966 0.147597930 0.149728623 0.152817843 0.154669824 0.156258464 0.156756537 0.161535918 0.161896665 0.173754818 0.174214488 0.180590536 0.184816410 0.186269518 0.189615289 0.190395167 0.194115461 0.194889529 0.198542308 0.200272429 0.205247321 0.206921558 0.207356590 0.210229422 0.215306767 0.216660414 0.217900663 0.219141745 0.220793688 0.225279550 0.226627728 0.232156133 0.235115104 0.235617616 0.235971145 0.244630469 0.256025977 0.257254957 0.263715492 0.269920422 0.280372637 0.283307174 0.286330849 0.291835777 0.296787337 0.304387224 0.305782373 0.307325050 0.314324606 0.316748562 0.317389426 0.322223348 0.329956676 0.332865384 0.351781768 0.352186604 0.355104409 0.355854242 0.360072031 0.362857694 0.364199317 0.384452418 0.386039941 0.392178740 0.410719784 0.425777143 0.430959101 0.462378577 0.468840939 0.478394329 0.483730280 0.484454135 0.487979373 0.491479681 0.509619188 0.515595945 0.535330861 0.569116505 0.575207430 0.592581894 0.594048057 0.607041195 0.608271581 0.644683290 0.647212789 0.649686028 0.674340985 0.678267258 0.685951899 0.691998360 0.693567106 0.700071537 0.704438859 0.718040809 0.741911739 0.751331090 0.759406663 0.769704895 0.773195467 0.779117949 0.810992327 0.815585838 0.819882176 0.822502622 0.823546393 0.831650875 0.834919292 0.836773576 0.842433238 0.845849760 0.847549742 0.849838693 0.859252139 0.865920262 0.867045275 0.874205929 0.885855400 0.886235230 0.889695508 0.899926642 0.901027374 0.904124816 0.923491324 0.927910234 0.936222610 0.937504488 0.966195350 0.976114436 0.986102857 1.001254538 1.019680713 1.028344257 1.042052212 1.050955023 1.057614319 1.068855474 1.086684984 1.088750079 1.104615376 1.107829135 1.112507633 1.124928485 1.135980532 1.139100705 1.144648017 1.175488516 1.179037618 1.181250605 1.186951889 1.191485276 1.196455104 1.224659943 1.228353611 1.275062553 1.302613218 1.320162195 1.328318103 1.333401907 1.336428443 1.336807555 1.342900297 1.343438828 1.345084425 1.359274232 1.378820473 1.382998438 1.385312901 1.416011052 1.420431531 1.436732477 1.551488567 1.682043753 1.776434556</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">249</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34091073" y3="0.02898555" z3="-0.19086706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38512616" y3="0.16546888" z3="0.42153656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64345866" y3="0.43629697" z3="-0.33626908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7174785" y3="1.22466858" z3="-2.25116918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38565665" y3="0.40983906" z3="-1.1810918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71975577" y3="0.82943785" z3="-3.65339349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61697025" y3="1.7346961" z3="-3.11783332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35759122" y3="2.57075164" z3="-4.59028365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54823423" y3="1.22978284" z3="-4.36220254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47581323" y3="2.90414611" z3="-5.14628358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92791419" y3="-0.50137701" z3="-3.44531528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09933429" y3="0.00715902" z3="-1.00133894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40646664" y3="-1.13017443" z3="-2.0108861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93448854" y3="-1.00481117" z3="-1.83616567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11115315" y3="-2.45431608" z3="-1.86711048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13950364" y3="-3.60303868" z3="0.66250492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03023126" y3="-5.28653888" z3="-4.74092615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25533695" y3="-5.02043534" z3="-3.70470617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84483102" y3="-4.30598993" z3="-1.08961224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77341159" y3="-4.61613347" z3="-2.8560489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57145221" y3="-5.09497216" z3="-3.24514951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8670007" y3="-4.73194746" z3="-1.93355186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49083639" y3="-4.27451718" z3="-1.53208466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80690072" y3="-4.54812836" z3="-3.20385406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37415534" y3="-5.40553188" z3="-3.91779425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9042692" y3="-4.75643893" z3="-1.58964066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02986127" y3="-3.84612324" z3="0.22795951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16792021" y3="-3.6264058" z3="0.87451607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05780177" y3="-4.08810749" z3="0.44438703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16008603" y3="-3.48555684" z3="2.34101185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21372181" y3="-3.29049375" z3="5.13833418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35712638" y3="-3.67819516" z3="3.04633197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98965906" y3="-3.2017607" z3="3.06056462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01386582" y3="-3.10501337" z3="4.44888548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38317492" y3="-3.58263255" z3="4.43485543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27487701" y3="-3.9123975" z3="2.49979826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02978534" y3="-3.07812882" z3="2.55460891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08226377" y3="-2.90572163" z3="4.98639716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3221503" y3="-3.74383969" z3="4.97148426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23208603" y3="-3.22280009" z3="6.22965301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41658129" y3="-3.91437129" z3="-0.63142866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17764779" y3="-3.41981548" z3="-1.08834838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51533298" y3="0.22037823" z3="-4.71027237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07236834" y3="-1.70001748" z3="0.01289344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88621485" y3="-0.94363773" z3="1.16915226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81819102" y3="-0.29933766" z3="1.49293028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34155974" y3="0.57079714" z3="1.19666768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40569582" y3="1.45077871" z3="-0.44073638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.0050254" y3="-0.68710051" z3="1.40020931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33776883" y3="1.78150163" z3="2.62636642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85662481" y3="-0.9217273" z3="2.07165994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61666068" y3="-0.30331531" z3="3.32594121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17503375" y3="0.74749177" z3="-1.25913523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37815201" y3="2.23136561" z3="-0.44525405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37969245" y3="1.94428196" z3="-0.60833561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01977284" y3="-1.04788046" z3="2.44211916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98257685" y3="-0.22956543" z3="1.17112321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88457322" y3="-1.53105236" z3="0.70161974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40253359" y3="1.25506018" z3="3.5951215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.599438" y3="2.36737136" z3="2.62404819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17803643" y3="2.49530758" z3="2.56059047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75586321" y3="-0.76428592" z3="3.83640289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.53011998" y3="-0.46653587" z3="3.91341465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43773674" y3="0.77698688" z3="3.19938135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84747509" y3="-0.73589867" z3="0.9890116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40927359" y3="-2.05827277" z3="0.84250008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75821267" y3="-2.70689151" z3="1.88443893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56249717" y3="-2.02065221" z3="3.07940035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05479411" y3="-0.73497866" z3="3.28223569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70570404" y3="-0.09966142" z3="2.22947157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50387318" y3="-2.54982305" z3="-0.12743546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3526433" y3="-3.71107484" z3="1.75559535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70170047" y3="-2.62007897" z3="4.10411041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.88285478" y3="-0.23087864" z3="4.23348658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.05856068" y3="0.92825121" z3="2.35117523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80549992" y3="0.43494648" z3="-4.29437026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7808606" y3="-0.53524375" z3="-4.48228436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42473577" y3="-1.72423093" z3="-5.10799039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13431149" y3="-1.94932042" z3="-5.57735577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83376606" y3="-0.97557286" z3="-5.36811693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05722123" y3="1.35564459" z3="-3.76183143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80241284" y3="-0.39355209" z3="-4.12876517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43254856" y3="-2.77648434" z3="-5.25708129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10252173" y3="-2.88752223" z3="-6.07925477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85823837" y3="-1.15681598" z3="-5.69699074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38570254" y3="-1.93063953" z3="5.05424877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31233733" y3="-3.75589429" z3="3.9284972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.1998453" y3="-3.67843032" z3="-6.03323618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44086145" y3="-2.69310707" z3="-4.58449931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06083717" y3="1.17155091" z3="-1.47890539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09689805" y3="1.55808618" z3="-2.45518952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42585173" y3="1.518285" z3="-1.67182792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8293384" y3="2.19853624" z3="-2.79421129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15461487" y3="1.22248163" z3="-0.91076658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88351447" y3="2.4570651" z3="-2.93384659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55065346" y3="2.24361792" z3="-3.61613549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87881936" y3="2.55455685" z3="-3.78090784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82729338" y3="2.51496539" z3="-4.38853725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20539274" y3="3.07715012" z3="-4.68484515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37286682" y3="3.1379231" z3="-3.29974893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25344067" y3="3.54828986" z3="-4.08209954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16992551" y3="4.1499514" z3="-2.69393393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90504821" y3="5.48258646" z3="-2.90164364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00092431" y3="3.86246654" z3="-2.04801517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.53229216" y3="6.24051856" z3="-2.42127434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01295743" y3="4.93538258" z3="-4.28972496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8241333" y3="5.88489209" z3="-3.72169066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15854245" y3="5.23139179" z3="-4.90628684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62933834" y3="6.94779874" z3="-3.88664076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47518914" y3="-2.17047281" z3="-0.29636802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45468252" y3="-2.96804861" z3="-1.05841763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00204019" y3="-2.54335558" z3="0.59661619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08658066" y3="-1.34921621" z3="-0.71642071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17276551" y3="-1.41504662" z3="-1.16331528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30510096" y3="-0.37524037" z3="-1.51560499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09589218" y3="-1.54514707" z3="-0.96280227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42096731" y3="-2.07250372" z3="-2.009836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3409,.029,-.1909;7.3851,.1655,.4215;6.6435,.4363,-.3363;4.7175,1.2247,-2.2512;4.3857,.4098,-1.1811;2.7198,.8294,-3.6534;3.617,1.7347,-3.1178;1.3576,2.5708,-4.5903;1.5482,1.2298,-4.3622;.4758,2.9041,-5.1463;2.9279,-.5014,-3.4453;3.0993,.0072,-1.0013;2.4065,-1.1302,-2.0109;.9345,-1.0048,-1.8362;3.1112,-2.4543,-1.8671;-.1395,-3.603,.6625;-.0302,-5.2865,-4.7409;-.2553,-5.0204,-3.7047;-.8448,-4.306,-1.0896;.7734,-4.6161,-2.856;-1.5715,-5.095,-3.2451;-1.867,-4.7319,-1.9336;.4908,-4.2745,-1.5321;1.8069,-4.5481,-3.2039;-2.3742,-5.4055,-3.9178;-2.9043,-4.7564,-1.5896;-1.0299,-3.8461,.228;-2.1679,-3.6264,.8745;-3.0578,-4.0881,.4444;-2.1601,-3.4856,2.341;-2.2137,-3.2905,5.1383;-3.3571,-3.6782,3.0463;-.9897,-3.2018,3.0606;-1.0139,-3.105,4.4489;-3.3832,-3.5826,4.4349;-4.2749,-3.9124,2.4998;-.0298,-3.0781,2.5546;-.0823,-2.9057,4.9864;-4.3222,-3.7438,4.9715;-2.2321,-3.2228,6.2297;1.4166,-3.9144,-.6314;2.1776,-3.4198,-1.0883;.5153,.2204,-4.7103;-3.0724,-1.7,.0129;-2.8862,-.9436,1.1692;-1.8182,-.2993,1.4929;-.3416,.5708,1.1967;-.4057,1.4508,-.4407;1.005,-.6871,1.4002;-.3378,1.7815,2.6264;-3.8566,-.9217,2.0717;-3.6167,-.3033,3.3259;-.175,.7475,-1.2591;.3782,2.2314,-.4453;-1.3797,1.9443,-.6083;1.0198,-1.0479,2.4421;1.9826,-.2296,1.1711;.8846,-1.5311,.7016;-.4025,1.2551,3.5951;.5994,2.3674,2.624;-1.178,2.4953,2.5606;-2.7559,-.7643,3.8364;-4.5301,-.4665,3.9134;-3.4377,.777,3.1994;4.8475,-.7359,.989;4.4093,-2.0583,.8425;3.7582,-2.7069,1.8844;3.5625,-2.0207,3.0794;4.0548,-.735,3.2822;4.7057,-.0997,2.2295;4.5039,-2.5498,-.1274;3.3526,-3.7111,1.7556;2.7017,-2.6201,4.1041;3.8829,-.2309,4.2335;5.0586,.9283,2.3512;-.8055,.4349,-4.2944;-1.7809,-.5352,-4.4823;-1.4247,-1.7242,-5.108;-.1343,-1.9493,-5.5774;.8338,-.9756,-5.3681;-1.0572,1.3556,-3.7618;-2.8024,-.3936,-4.1288;-2.4325,-2.7765,-5.2571;.1025,-2.8875,-6.0793;1.8582,-1.1568,-5.697;2.3857,-1.9306,5.0542;2.3123,-3.7559,3.9285;-2.1998,-3.6784,-6.0332;-3.4409,-2.6931,-4.5845;7.0608,1.1716,-1.4789;6.0969,1.5581,-2.4552;8.4259,1.5183,-1.6718;8.8293,2.1985,-2.7942;9.1546,1.2225,-.9108;9.8835,2.4571,-2.9338;6.5507,2.2436,-3.6161;7.8788,2.5546,-3.7809;5.8273,2.515,-4.3885;8.2054,3.0772,-4.6848;3.3729,3.1379,-3.2997;2.2534,3.5483,-4.0821;4.1699,4.15,-2.6939;3.905,5.4826,-2.9016;5.0009,3.8625,-2.048;4.5323,6.2405,-2.4213;2.013,4.9354,-4.2897;2.8241,5.8849,-3.7217;1.1585,5.2314,-4.9063;2.6293,6.9478,-3.8866;-4.4752,-2.1705,-.2964;-4.4547,-2.968,-1.0584;-5.002,-2.5434,.5966;-5.0866,-1.3492,-.7164;-2.1728,-1.415,-1.1633;-2.3051,-.3752,-1.5156;-1.0959,-1.5451,-.9628;-2.421,-2.0725,-2.0098;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650401089137</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001645394403 0.000300886942 0.018201469499 0.005331311265</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030685288 -0.000408198 0.000049491 0.000082864 0.000173803 0.000303704 0.000357275 0.000442958 0.000594934 0.000816652 0.000932051 0.001060810 0.001207264 0.001333879 0.001371341 0.001403405 0.001565768 0.001792880 0.001839991 0.001947971 0.002164778 0.002346405 0.002576432 0.002670218 0.002689574 0.003015647 0.003117932 0.003424538 0.003517675 0.003905594 0.004451833 0.004715283 0.004771668 0.005082383 0.005989598 0.006114987 0.006189807 0.006644344 0.006954160 0.007742039 0.008106223 0.008228122 0.009311957 0.009517256 0.010027665 0.010575302 0.010736846 0.011056463 0.011818955 0.012257449 0.012947136 0.013111838 0.014060560 0.014577489 0.015265741 0.015519830 0.015824239 0.016321882 0.016996255 0.017489564 0.018142888 0.018547092 0.019454458 0.019598656 0.020045407 0.020811107 0.021223559 0.021407987 0.022599775 0.023155159 0.025068128 0.026295989 0.026791497 0.027657698 0.027783092 0.029519093 0.029993308 0.031582218 0.033296748 0.033608111 0.033981553 0.035792423 0.036911492 0.037718278 0.039585302 0.040058360 0.040848408 0.042347371 0.044253037 0.045171876 0.045432432 0.047116672 0.047942545 0.049244822 0.050441415 0.050990210 0.051225174 0.051473694 0.052483182 0.052689062 0.052921417 0.053113695 0.054728405 0.054944729 0.056014317 0.056273686 0.056528032 0.056699811 0.057207362 0.059074114 0.060486913 0.060921222 0.061705997 0.062355821 0.063309500 0.064523062 0.065356808 0.066057463 0.066542527 0.068322502 0.069085618 0.070274663 0.072737345 0.074500962 0.074790236 0.076327736 0.078456593 0.084058269 0.086541618 0.087108078 0.087609396 0.088894041 0.090552695 0.091235143 0.093810385 0.094701234 0.095594845 0.096420764 0.097848692 0.098832483 0.099255794 0.100180340 0.100839074 0.102458497 0.103208463 0.103571598 0.104192105 0.104487972 0.106321637 0.106951161 0.108024179 0.109768204 0.110941861 0.112251924 0.112962177 0.115035927 0.116184614 0.116738496 0.118706005 0.120758655 0.121799976 0.123133072 0.124409476 0.125686450 0.126228392 0.126633245 0.127161851 0.132038500 0.135077168 0.135810340 0.142787073 0.143747895 0.147063658 0.147600694 0.149728689 0.152834509 0.154669862 0.156264978 0.156756275 0.161536839 0.161897074 0.173759125 0.174216986 0.180656349 0.184826531 0.186282417 0.189615895 0.190394727 0.194115389 0.194930870 0.198561579 0.200272741 0.205247965 0.206921713 0.207358134 0.210229903 0.215349756 0.216672942 0.217901534 0.219143654 0.220795766 0.225279700 0.226642780 0.232158889 0.235115128 0.235630686 0.235971441 0.244634727 0.256030801 0.257255294 0.263718053 0.269922581 0.280372944 0.283311309 0.286331103 0.291836361 0.296789679 0.304387214 0.305782469 0.307326285 0.314340419 0.316748919 0.317391741 0.322223932 0.329974763 0.332865561 0.351782238 0.352186940 0.355106146 0.355859259 0.360072064 0.362867492 0.364200418 0.384452621 0.386039756 0.392179430 0.410724480 0.425800222 0.430961919 0.462378750 0.468842382 0.478401940 0.483731622 0.484465264 0.487985075 0.491479599 0.509622400 0.515608250 0.535342481 0.569179448 0.575209761 0.592588902 0.594054846 0.607118338 0.608290275 0.644683277 0.647274255 0.649693464 0.674345077 0.678302455 0.685965649 0.692000572 0.693566671 0.700071509 0.704440174 0.718070004 0.741981325 0.751331153 0.759407361 0.769705537 0.773195646 0.779191519 0.810992294 0.815586084 0.819887908 0.822570902 0.823548587 0.831652240 0.834921409 0.836933935 0.842433216 0.845849981 0.847549860 0.849839434 0.859253101 0.865921438 0.867045261 0.874209368 0.885861169 0.886239060 0.889695585 0.899930346 0.901033349 0.904126132 0.923523855 0.927929716 0.936283967 0.937515040 0.966196506 0.976114404 0.986116167 1.001295876 1.019756057 1.028346647 1.042053094 1.050956441 1.057625837 1.068856170 1.086689097 1.088749987 1.104624151 1.107876634 1.112507984 1.124951681 1.135980695 1.139246885 1.144648809 1.175639381 1.179037651 1.181256604 1.186957378 1.191491533 1.196459858 1.224666031 1.228355297 1.275063278 1.302619894 1.320278631 1.328317876 1.333403653 1.336443581 1.336973594 1.342901930 1.343457420 1.345085743 1.359281801 1.378820410 1.382999347 1.385346314 1.416023171 1.420431471 1.436732764 1.551488943 1.682045588 1.776438548</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">250</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3385047" y3="0.03123394" z3="-0.18631681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38189159" y3="0.16869855" z3="0.42646523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64056148" y3="0.43841433" z3="-0.33194884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71510397" y3="1.22330355" z3="-2.248523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38347334" y3="0.41017204" z3="-1.17751807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71870943" y3="0.82456328" z3="-3.65224908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6148291" y3="1.73136198" z3="-3.11667825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35439622" y3="2.56672745" z3="-4.58891598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54747108" y3="1.22404669" z3="-4.3616675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47312638" y3="2.89857502" z3="-5.14660035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92682758" y3="-0.50548482" z3="-3.44204317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09741831" y3="0.00656428" z3="-0.99852297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40723963" y3="-1.13360835" z3="-2.00670178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93496899" y3="-1.01188264" z3="-1.83155639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11528313" y3="-2.45574594" z3="-1.86165803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13964823" y3="-3.59605609" z3="0.65637234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02585008" y3="-5.291105" z3="-4.74330255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25255208" y3="-5.02073663" z3="-3.70835381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84512011" y3="-4.29781576" z3="-1.09599267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77630831" y3="-4.619996" z3="-2.85793032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57076797" y3="-5.08674144" z3="-3.25192179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86785096" y3="-4.71936179" z3="-1.94182969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4919418" y3="-4.27409839" z3="-1.53531204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81120927" y3="-4.55859054" z3="-3.20327259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37280807" y3="-5.39578868" z3="-3.92553372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90533014" y3="-4.73937855" z3="-1.60058467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0304112" y3="-3.8372137" z3="0.22121092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16830914" y3="-3.62078288" z3="0.86914442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05795499" y3="-4.08223093" z3="0.43802096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15982139" y3="-3.48501028" z3="2.33616826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21218568" y3="-3.30202963" z3="5.13435025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35672925" y3="-3.6799003" z3="3.04106144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98894403" y3="-3.20485192" z3="3.05655162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01248249" y3="-3.11413773" z3="4.44533035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38217848" y3="-3.59030071" z3="4.42999597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27454509" y3="-3.91168001" z3="2.49386929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02863139" y3="-3.0804456" z3="2.55070587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08083931" y3="-2.91718443" z3="4.9834844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3210098" y3="-3.75340581" z3="4.96615213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22997051" y3="-3.23916353" z3="6.22598293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41719021" y3="-3.91793471" z3="-0.6327769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18068839" y3="-3.42423158" z3="-1.08750297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51516886" y3="0.21451199" z3="-4.70963782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07691518" y3="-1.69281634" z3="0.01479034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88399779" y3="-0.93897516" z3="1.17170497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81378823" y3="-0.29639299" z3="1.4908582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33623984" y3="0.57257468" z3="1.19522672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39839428" y3="1.45132581" z3="-0.44304562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00793247" y3="-0.68742371" z3="1.40252361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33185884" y3="1.78485515" z3="2.62360806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8492704" y3="-0.91808001" z3="2.07986514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.60126613" y3="-0.30465619" z3="3.33490477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17454159" y3="0.74585222" z3="-1.26148808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39038195" y3="2.22661509" z3="-0.45055151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36946732" y3="1.95051617" z3="-0.60839527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01866248" y3="-1.04825538" z3="2.44445444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98632741" y3="-0.23103844" z3="1.17627012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88811631" y3="-1.53070161" z3="0.70313281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39567128" y3="1.25958566" z3="3.59297863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60547001" y3="2.37058572" z3="2.61990837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17197636" y3="2.4989827" z3="2.5579354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73923241" y3="-0.76974394" z3="3.83933118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.51191851" y3="-0.46767054" z3="3.92628021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.41967671" y3="0.77554604" z3="3.21107708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84589169" y3="-0.7331979" z3="0.99427175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41169438" y3="-2.05685068" z3="0.84933854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76110734" y3="-2.70597801" z3="1.89122611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5623986" y3="-2.01882598" z3="3.08502343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.05205973" y3="-0.73175765" z3="3.28736963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.70180606" y3="-0.09597088" z3="2.23408896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50858918" y3="-2.54935819" z3="-0.11969266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3574715" y3="-3.71134113" z3="1.76270136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.7011023" y3="-2.61903399" z3="4.10876851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8796122" y3="-0.22737909" z3="4.23923652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0520507" y3="0.93287686" z3="2.35495791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80655092" y3="0.4306549" z3="-4.29702701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78262646" y3="-0.53816896" z3="-4.48870089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42619613" y3="-1.72748246" z3="-5.1130819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13445554" y3="-1.95459798" z3="-5.57787023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83411816" y3="-0.98219406" z3="-5.36647075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05877944" y3="1.35182103" z3="-3.76560524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80536286" y3="-0.39517585" z3="-4.13887835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43505716" y3="-2.77761292" z3="-5.26556042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.10293162" y3="-2.89332101" z3="-6.07863925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85923708" y3="-1.16489843" z3="-5.69261308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37778245" y3="-1.92725115" z3="5.05463761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31868209" y3="-3.75773231" z3="3.93665981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20024822" y3="-3.68067802" z3="-6.03973743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44657983" y3="-2.6921426" z3="-4.59751898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05806991" y3="1.17337899" z3="-1.47495516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09433396" y3="1.5579997" z3="-2.45213452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4230655" y3="1.52233854" z3="-1.66747375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82656909" y3="2.20298101" z3="-2.79033716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15168226" y3="1.22752684" z3="-0.905974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8798506" y3="2.45875135" z3="-2.93086875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54801095" y3="2.24349635" z3="-3.61368043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87624935" y3="2.55660773" z3="-3.77809855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8244893" y3="2.51247741" z3="-4.38683057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20266527" y3="3.07580747" z3="-4.68319223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3691099" y3="3.13507325" z3="-3.29941787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25059286" y3="3.54358302" z3="-4.08406318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16496658" y3="4.14884124" z3="-2.69396087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90002974" y3="5.48136106" z3="-2.90380496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99623645" y3="3.86209174" z3="-2.04791657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.52939808" y3="6.23756535" z3="-2.42823478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01218551" y3="4.92842422" z3="-4.29704589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.82058439" y3="5.88143088" z3="-3.72658648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.15828051" y3="5.22323554" z3="-4.91485328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.62434538" y3="6.94484414" z3="-3.89241214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4813533" y3="-2.16195521" z3="-0.28810172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46508722" y3="-2.96164957" z3="-1.04826522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00575336" y3="-2.53222111" z3="0.60755208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.092441" y3="-1.34056881" z3="-0.7079249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18287908" y3="-1.4066205" z3="-1.1652367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31783521" y3="-0.36647054" z3="-1.51629173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10548034" y3="-1.5362699" z3="-0.96875914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4349484" y3="-2.0637609" z3="-2.01143886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3385,.0312,-.1863;7.3819,.1687,.4265;6.6406,.4384,-.3319;4.7151,1.2233,-2.2485;4.3835,.4102,-1.1775;2.7187,.8246,-3.6522;3.6148,1.7314,-3.1167;1.3544,2.5667,-4.5889;1.5475,1.224,-4.3617;.4731,2.8986,-5.1466;2.9268,-.5055,-3.442;3.0974,.0066,-.9985;2.4072,-1.1336,-2.0067;.935,-1.0119,-1.8316;3.1153,-2.4557,-1.8617;-.1396,-3.5961,.6564;-.0259,-5.2911,-4.7433;-.2526,-5.0207,-3.7084;-.8451,-4.2978,-1.096;.7763,-4.62,-2.8579;-1.5708,-5.0867,-3.2519;-1.8679,-4.7194,-1.9418;.4919,-4.2741,-1.5353;1.8112,-4.5586,-3.2033;-2.3728,-5.3958,-3.9255;-2.9053,-4.7394,-1.6006;-1.0304,-3.8372,.2212;-2.1683,-3.6208,.8691;-3.058,-4.0822,.438;-2.1598,-3.485,2.3362;-2.2122,-3.302,5.1344;-3.3567,-3.6799,3.0411;-.9889,-3.2049,3.0566;-1.0125,-3.1141,4.4453;-3.3822,-3.5903,4.43;-4.2745,-3.9117,2.4939;-.0286,-3.0804,2.5507;-.0808,-2.9172,4.9835;-4.321,-3.7534,4.9662;-2.23,-3.2392,6.226;1.4172,-3.9179,-.6328;2.1807,-3.4242,-1.0875;.5152,.2145,-4.7096;-3.0769,-1.6928,.0148;-2.884,-.939,1.1717;-1.8138,-.2964,1.4909;-.3362,.5726,1.1952;-.3984,1.4513,-.443;1.0079,-.6874,1.4025;-.3319,1.7849,2.6236;-3.8493,-.9181,2.0799;-3.6013,-.3047,3.3349;-.1745,.7459,-1.2615;.3904,2.2266,-.4506;-1.3695,1.9505,-.6084;1.0187,-1.0483,2.4445;1.9863,-.231,1.1763;.8881,-1.5307,.7031;-.3957,1.2596,3.593;.6055,2.3706,2.6199;-1.172,2.499,2.5579;-2.7392,-.7697,3.8393;-4.5119,-.4677,3.9263;-3.4197,.7755,3.2111;4.8459,-.7332,.9943;4.4117,-2.0569,.8493;3.7611,-2.706,1.8912;3.5624,-2.0188,3.085;4.0521,-.7318,3.2874;4.7018,-.096,2.2341;4.5086,-2.5494,-.1197;3.3575,-3.7113,1.7627;2.7011,-2.619,4.1088;3.8796,-.2274,4.2392;5.0521,.9329,2.355;-.8066,.4307,-4.297;-1.7826,-.5382,-4.4887;-1.4262,-1.7275,-5.1131;-.1345,-1.9546,-5.5779;.8341,-.9822,-5.3665;-1.0588,1.3518,-3.7656;-2.8054,-.3952,-4.1389;-2.4351,-2.7776,-5.2656;.1029,-2.8933,-6.0786;1.8592,-1.1649,-5.6926;2.3778,-1.9273,5.0546;2.3187,-3.7577,3.9367;-2.2002,-3.6807,-6.0397;-3.4466,-2.6921,-4.5975;7.0581,1.1734,-1.475;6.0943,1.558,-2.4521;8.4231,1.5223,-1.6675;8.8266,2.203,-2.7903;9.1517,1.2275,-.906;9.8799,2.4588,-2.9309;6.548,2.2435,-3.6137;7.8762,2.5566,-3.7781;5.8245,2.5125,-4.3868;8.2027,3.0758,-4.6832;3.3691,3.1351,-3.2994;2.2506,3.5436,-4.0841;4.165,4.1488,-2.694;3.9,5.4814,-2.9038;4.9962,3.8621,-2.0479;4.5294,6.2376,-2.4282;2.0122,4.9284,-4.297;2.8206,5.8814,-3.7266;1.1583,5.2232,-4.9149;2.6243,6.9448,-3.8924;-4.4814,-2.162,-.2881;-4.4651,-2.9616,-1.0483;-5.0058,-2.5322,.6076;-5.0924,-1.3406,-.7079;-2.1829,-1.4066,-1.1652;-2.3178,-.3665,-1.5163;-1.1055,-1.5363,-.9688;-2.4349,-2.0638,-2.0114;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650397217001</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001907381382 0.000317208166 0.019084253394 0.005328520804</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030686933 -0.000446704 -0.000035453 0.000068096 0.000222261 0.000314075 0.000360028 0.000429994 0.000595283 0.000812361 0.000933400 0.001052209 0.001207308 0.001322771 0.001369220 0.001402635 0.001560539 0.001785410 0.001849570 0.001945622 0.002167048 0.002343024 0.002576645 0.002671554 0.002689991 0.003017379 0.003113748 0.003425064 0.003516790 0.003902203 0.004451367 0.004714745 0.004768787 0.005083191 0.005989234 0.006117130 0.006207901 0.006642488 0.006953606 0.007741099 0.008107216 0.008228344 0.009308629 0.009512933 0.010035783 0.010572707 0.010735423 0.011072465 0.011825215 0.012255291 0.012947912 0.013111191 0.014063975 0.014577565 0.015282014 0.015521019 0.015843686 0.016326584 0.016985146 0.017488835 0.018144062 0.018546529 0.019467071 0.019599696 0.020046647 0.020817440 0.021223453 0.021413131 0.022598077 0.023154197 0.025037525 0.026298240 0.026791142 0.027662092 0.027800081 0.029522756 0.030103499 0.031599852 0.033294639 0.033615037 0.033993071 0.035790627 0.036918217 0.037713247 0.039584284 0.040059195 0.040850226 0.042346209 0.044190790 0.045092851 0.045428391 0.047118090 0.047943408 0.049245101 0.050442125 0.050991677 0.051227644 0.051491726 0.052483275 0.052689032 0.052923052 0.053114234 0.054727736 0.054943870 0.056013938 0.056273682 0.056528750 0.056703407 0.057213934 0.059083556 0.060491534 0.060922203 0.061708330 0.062357518 0.063311379 0.064523992 0.065358579 0.066052842 0.066542950 0.068332313 0.069086431 0.070276794 0.072737713 0.074503193 0.074790852 0.076331793 0.078457017 0.084060390 0.086542680 0.087108121 0.087609737 0.088904351 0.090556771 0.091250248 0.093840747 0.094714502 0.095645747 0.096421169 0.097849101 0.098819689 0.099273839 0.100180604 0.100846997 0.102462489 0.103209517 0.103580668 0.104228102 0.104496585 0.106322748 0.106953418 0.108052494 0.109768354 0.110941484 0.112264472 0.112998989 0.115037309 0.116186596 0.116775913 0.118705995 0.120760417 0.121911624 0.123137616 0.124413531 0.125761664 0.126229034 0.126634637 0.127161617 0.132036533 0.135078034 0.135809745 0.142788928 0.143751844 0.147063462 0.147603251 0.149729251 0.152834989 0.154670418 0.156259979 0.156737161 0.161536280 0.161896121 0.173761695 0.174223289 0.180751324 0.184833764 0.186315189 0.189612637 0.190392941 0.194115148 0.195002922 0.198592587 0.200273684 0.205248856 0.206922317 0.207357991 0.210230536 0.215443350 0.216685266 0.217903479 0.219148430 0.220796486 0.225280499 0.226657219 0.232163012 0.235116806 0.235649250 0.235973624 0.244638973 0.256039034 0.257256104 0.263724852 0.269929355 0.280375971 0.283315078 0.286331226 0.291836475 0.296790549 0.304388057 0.305782442 0.307325706 0.314378822 0.316748698 0.317393241 0.322225565 0.329996706 0.332866211 0.351782876 0.352186173 0.355103732 0.355861881 0.360072321 0.362888914 0.364200681 0.384447299 0.386039783 0.392179651 0.410722290 0.425826694 0.430960381 0.462379673 0.468849470 0.478418582 0.483731359 0.484484724 0.487969565 0.491476506 0.509623610 0.515620278 0.535362925 0.569240475 0.575226352 0.592589516 0.594059613 0.607197590 0.608301160 0.644682654 0.647337548 0.649694668 0.674346174 0.678337045 0.685988321 0.692001911 0.693565001 0.700069325 0.704441231 0.718100918 0.742050608 0.751330820 0.759409865 0.769708962 0.773195843 0.779290574 0.810992171 0.815599012 0.819888099 0.822636379 0.823551398 0.831649153 0.834928141 0.837188494 0.842433795 0.845850296 0.847549020 0.849841637 0.859254114 0.865923394 0.867043926 0.874210285 0.885866917 0.886242971 0.889696292 0.899941525 0.901038703 0.904128906 0.923566863 0.927936077 0.936363521 0.937528143 0.966197077 0.976114521 0.986135881 1.001358862 1.019862954 1.028351462 1.042054384 1.050958607 1.057639609 1.068856300 1.086702584 1.088750104 1.104638630 1.107924781 1.112508214 1.125013824 1.135980914 1.139344900 1.144652747 1.175827800 1.179038333 1.181273836 1.186969081 1.191502559 1.196459727 1.224671837 1.228356652 1.275026078 1.302640943 1.320426730 1.328319595 1.333396059 1.336453782 1.337203097 1.342897048 1.343485002 1.345085779 1.359275103 1.378819817 1.382999645 1.385396289 1.415939541 1.420431175 1.436635459 1.551490416 1.682052709 1.776427885</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">251</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33555958" y3="0.03405513" z3="-0.18153326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37836624" y3="0.17680115" z3="0.43471175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63765613" y3="0.44418736" z3="-0.32527331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.713742" y3="1.22329257" z3="-2.2460439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38135263" y3="0.41054994" z3="-1.17446683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71786501" y3="0.8229805" z3="-3.64986816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61409688" y3="1.730119" z3="-3.11562322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.35807282" y3="2.56127739" z3="-4.59573419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.54767553" y3="1.22125882" z3="-4.36188799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.47767664" y3="2.89291795" z3="-5.15493893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92646636" y3="-0.50733833" z3="-3.4389692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0953458" y3="0.00626353" z3="-0.99595822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40667295" y3="-1.13532149" z3="-2.00359466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93413194" y3="-1.01523779" z3="-1.82931935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11605293" y3="-2.45669354" z3="-1.85741797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13942385" y3="-3.59096245" z3="0.65146205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02298769" y3="-5.28754678" z3="-4.74629003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25026422" y3="-5.01671695" z3="-3.71178548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84450705" y3="-4.29231628" z3="-1.10078959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77852363" y3="-4.61981301" z3="-2.85945153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56907671" y3="-5.07842962" z3="-3.25794593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86719604" y3="-4.70980479" z3="-1.94860344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49334226" y3="-4.27361786" z3="-1.53732265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81399358" y3="-4.56184066" z3="-3.20269798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37136308" y3="-5.38420704" z3="-3.93310732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90622377" y3="-4.72360447" z3="-1.6096662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03006513" y3="-3.83206326" z3="0.21642369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16762873" y3="-3.61908838" z3="0.86578043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05698904" y3="-4.08044274" z3="0.43389877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15814508" y3="-3.48784455" z3="2.33325223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20841452" y3="-3.31638633" z3="5.13232998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35426842" y3="-3.68641932" z3="3.03846073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98682178" y3="-3.2097452" z3="3.05379175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.00948671" y3="-3.12458032" z3="4.44298139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37862839" y3="-3.60268275" z3="4.42781666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27255758" y3="-3.91641868" z3="2.49109274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02740853" y3="-3.08194187" z3="2.54770939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07775898" y3="-2.92883564" z3="4.98133831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3168228" y3="-3.76894225" z3="4.96412039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22527793" y3="-3.25824779" z3="6.22426055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41838888" y3="-3.9217076" z3="-0.63275406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18128338" y3="-3.42632547" z3="-1.0853625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51473664" y3="0.21181074" z3="-4.70975364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08130333" y3="-1.68921089" z3="0.0183592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88264792" y3="-0.93749977" z3="1.17557126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81071505" y3="-0.29531739" z3="1.49033505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33465673" y3="0.57434081" z3="1.19236636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.39641327" y3="1.44982945" z3="-0.44755676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00864246" y3="-0.68571219" z3="1.40289882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33016154" y3="1.79083721" z3="2.6172467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84351839" y3="-0.91850338" z3="2.08838297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.58805405" y3="-0.3106358" z3="3.34478473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.17815925" y3="0.74227638" z3="-1.26549894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.39767107" y3="2.22027601" z3="-0.45814992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.36499377" y3="1.95535124" z3="-0.61130526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01709282" y3="-1.04671996" z3="2.44487887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9876909" y3="-0.22972935" z3="1.17897908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.88943223" y3="-1.52878925" z3="0.70297824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.3938578" y3="1.26854443" z3="3.58849265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60665974" y3="2.37725039" z3="2.6115041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1707325" y3="2.50427085" z3="2.54906704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.72394837" y3="-0.77940944" z3="3.84275387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49590151" y3="-0.47469439" z3="3.94033848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.40573624" y3="0.76984525" z3="3.22478126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8425033" y3="-0.73006105" z3="0.99902778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41011247" y3="-2.05459671" z3="0.85420801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76096483" y3="-2.70429162" z3="1.89667694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.56050733" y3="-2.01658323" z3="3.09003381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04638818" y3="-0.72816728" z3="3.29101746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69599612" y3="-0.09198726" z3="2.2379695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50721665" y3="-2.54715492" z3="-0.11526795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36019635" y3="-3.71070156" z3="1.76937308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.70147346" y3="-2.61831667" z3="4.11487263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87016338" y3="-0.22276019" z3="4.24060941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04383039" y3="0.93776695" z3="2.3580187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80733158" y3="0.43090858" z3="-4.30006026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78486609" y3="-0.53617381" z3="-4.4911793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42965543" y3="-1.7267684" z3="-5.11465951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13746345" y3="-1.95723468" z3="-5.57642412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83292147" y3="-0.98659524" z3="-5.36300055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05883453" y3="1.35345399" z3="-3.77046996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80777291" y3="-0.39043358" z3="-4.14335939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44088227" y3="-2.77465282" z3="-5.26988269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09869443" y3="-2.89693262" z3="-6.07600136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85853465" y3="-1.17190433" z3="-5.68623196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37456205" y3="-1.92590747" z3="5.05958562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32503873" y3="-3.7592281" z3="3.94520929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20688588" y3="-3.67805656" z3="-6.04388361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45324055" y3="-2.68630919" z3="-4.60399543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0558724" y3="1.17670517" z3="-1.46926532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09310278" y3="1.55824811" z3="-2.44865819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42060832" y3="1.52468792" z3="-1.66080211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82516736" y3="2.20158445" z3="-2.78481997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14835194" y3="1.2325302" z3="-0.89735631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.87927849" y3="2.46113101" z3="-2.9234531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54800978" y3="2.24043125" z3="-3.61112831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.87606376" y3="2.55298344" z3="-3.77449301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82573397" y3="2.50806474" z3="-4.38581736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20362381" y3="3.07345197" z3="-4.67960916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37055512" y3="3.13276787" z3="-3.30303263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25329152" y3="3.54040679" z3="-4.08983156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.16654388" y3="4.14703746" z3="-2.69957919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.90320943" y3="5.47891533" z3="-2.91426814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="4.99558756" y3="3.8621078" z3="-2.05003793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.52992932" y3="6.2384843" z3="-2.43603195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.01434122" y3="4.926651" z3="-4.3046655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8249233" y3="5.87822675" z3="-3.7392361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.16187169" y3="5.22018559" z3="-4.92507291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.63158752" y3="6.94053309" z3="-3.9099726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48725331" y3="-2.15848539" z3="-0.27801911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47459703" y3="-2.95646923" z3="-1.03982353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00622128" y3="-2.53066957" z3="0.61960856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.1019505" y3="-1.33705005" z3="-0.69298192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1935168" y3="-1.40140644" z3="-1.16634501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33269759" y3="-0.36193681" z3="-1.51697434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11432963" y3="-1.52965084" z3="-0.97590273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44867017" y3="-2.05910272" z3="-2.01113501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3356,.0341,-.1815;7.3784,.1768,.4347;6.6377,.4442,-.3253;4.7137,1.2233,-2.246;4.3814,.4105,-1.1745;2.7179,.823,-3.6499;3.6141,1.7301,-3.1156;1.3581,2.5613,-4.5957;1.5477,1.2213,-4.3619;.4777,2.8929,-5.1549;2.9265,-.5073,-3.439;3.0953,.0063,-.996;2.4067,-1.1353,-2.0036;.9341,-1.0152,-1.8293;3.1161,-2.4567,-1.8574;-.1394,-3.591,.6515;-.023,-5.2875,-4.7463;-.2503,-5.0167,-3.7118;-.8445,-4.2923,-1.1008;.7785,-4.6198,-2.8595;-1.5691,-5.0784,-3.2579;-1.8672,-4.7098,-1.9486;.4933,-4.2736,-1.5373;1.814,-4.5618,-3.2027;-2.3714,-5.3842,-3.9331;-2.9062,-4.7236,-1.6097;-1.0301,-3.8321,.2164;-2.1676,-3.6191,.8658;-3.057,-4.0804,.4339;-2.1581,-3.4878,2.3333;-2.2084,-3.3164,5.1323;-3.3543,-3.6864,3.0385;-.9868,-3.2097,3.0538;-1.0095,-3.1246,4.443;-3.3786,-3.6027,4.4278;-4.2726,-3.9164,2.4911;-.0274,-3.0819,2.5477;-.0778,-2.9288,4.9813;-4.3168,-3.7689,4.9641;-2.2253,-3.2582,6.2243;1.4184,-3.9217,-.6328;2.1813,-3.4263,-1.0854;.5147,.2118,-4.7098;-3.0813,-1.6892,.0184;-2.8826,-.9375,1.1756;-1.8107,-.2953,1.4903;-.3347,.5743,1.1924;-.3964,1.4498,-.4476;1.0086,-.6857,1.4029;-.3302,1.7908,2.6172;-3.8435,-.9185,2.0884;-3.5881,-.3106,3.3448;-.1782,.7423,-1.2655;.3977,2.2203,-.4581;-1.365,1.9554,-.6113;1.0171,-1.0467,2.4449;1.9877,-.2297,1.179;.8894,-1.5288,.703;-.3939,1.2685,3.5885;.6067,2.3773,2.6115;-1.1707,2.5043,2.5491;-2.7239,-.7794,3.8428;-4.4959,-.4747,3.9403;-3.4057,.7698,3.2248;4.8425,-.7301,.999;4.4101,-2.0546,.8542;3.761,-2.7043,1.8967;3.5605,-2.0166,3.09;4.0464,-.7282,3.291;4.696,-.092,2.238;4.5072,-2.5472,-.1153;3.3602,-3.7107,1.7694;2.7015,-2.6183,4.1149;3.8702,-.2228,4.2406;5.0438,.9378,2.358;-.8073,.4309,-4.3001;-1.7849,-.5362,-4.4912;-1.4297,-1.7268,-5.1147;-.1375,-1.9572,-5.5764;.8329,-.9866,-5.363;-1.0588,1.3535,-3.7705;-2.8078,-.3904,-4.1434;-2.4409,-2.7747,-5.2699;.0987,-2.8969,-6.076;1.8585,-1.1719,-5.6862;2.3746,-1.9259,5.0596;2.325,-3.7592,3.9452;-2.2069,-3.6781,-6.0439;-3.4532,-2.6863,-4.604;7.0559,1.1767,-1.4693;6.0931,1.5582,-2.4487;8.4206,1.5247,-1.6608;8.8252,2.2016,-2.7848;9.1484,1.2325,-.8974;9.8793,2.4611,-2.9235;6.548,2.2404,-3.6111;7.8761,2.553,-3.7745;5.8257,2.5081,-4.3858;8.2036,3.0735,-4.6796;3.3706,3.1328,-3.303;2.2533,3.5404,-4.0898;4.1665,4.147,-2.6996;3.9032,5.4789,-2.9143;4.9956,3.8621,-2.05;4.5299,6.2385,-2.436;2.0143,4.9267,-4.3047;2.8249,5.8782,-3.7392;1.1619,5.2202,-4.9251;2.6316,6.9405,-3.91;-4.4873,-2.1585,-.278;-4.4746,-2.9565,-1.0398;-5.0062,-2.5307,.6196;-5.102,-1.3371,-.693;-2.1935,-1.4014,-1.1663;-2.3327,-.3619,-1.517;-1.1143,-1.5297,-.9759;-2.4487,-2.0591,-2.0111;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650390026505</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001802136035 0.000327268652 0.019601215045 0.005345182207</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030687791 -0.000538451 0.000034750 0.000068059 0.000220916 0.000316095 0.000363713 0.000430601 0.000596472 0.000819640 0.000932641 0.001052289 0.001207500 0.001322866 0.001369221 0.001402830 0.001563244 0.001784898 0.001855058 0.001946052 0.002166550 0.002343041 0.002577211 0.002671316 0.002689898 0.003018177 0.003116331 0.003427096 0.003517130 0.003903023 0.004452391 0.004715399 0.004768751 0.005083783 0.005989577 0.006119753 0.006220381 0.006643295 0.006953465 0.007741267 0.008107820 0.008229418 0.009310405 0.009515170 0.010045738 0.010579155 0.010736033 0.011092777 0.011829210 0.012259022 0.012948758 0.013112211 0.014070164 0.014578613 0.015307164 0.015521256 0.015858018 0.016334903 0.016985281 0.017489420 0.018145572 0.018546557 0.019475091 0.019608034 0.020048170 0.020821677 0.021223592 0.021415706 0.022598333 0.023154442 0.025041474 0.026300324 0.026791021 0.027663269 0.027804548 0.029524403 0.030182634 0.031614343 0.033294585 0.033620824 0.034008356 0.035790153 0.036930986 0.037713316 0.039583983 0.040059483 0.040852324 0.042346503 0.044191631 0.045092800 0.045434093 0.047118559 0.047943363 0.049245118 0.050446806 0.050995185 0.051228748 0.051509601 0.052483511 0.052689037 0.052923938 0.053114382 0.054728546 0.054944544 0.056014002 0.056273677 0.056530134 0.056707371 0.057217383 0.059095546 0.060497265 0.060926175 0.061710102 0.062360400 0.063313613 0.064524083 0.065361188 0.066054169 0.066542694 0.068342780 0.069086834 0.070283479 0.072739428 0.074503527 0.074790817 0.076343451 0.078458707 0.084061170 0.086544200 0.087108257 0.087612916 0.088921923 0.090563227 0.091258852 0.093867342 0.094724672 0.095701151 0.096421404 0.097849783 0.098820079 0.099274808 0.100183006 0.100849845 0.102467051 0.103210435 0.103584987 0.104268030 0.104509088 0.106326281 0.106958950 0.108081201 0.109769098 0.110942656 0.112278950 0.113017519 0.115038965 0.116188766 0.116788049 0.118706004 0.120760237 0.121996169 0.123148057 0.124425308 0.125823860 0.126229914 0.126634518 0.127162157 0.132036863 0.135078787 0.135809694 0.142791855 0.143754970 0.147063645 0.147604806 0.149730146 0.152855882 0.154670335 0.156273936 0.156737511 0.161539457 0.161896270 0.173761958 0.174223483 0.180818229 0.184841822 0.186329474 0.189612382 0.190392973 0.194117252 0.195048907 0.198611776 0.200273877 0.205249726 0.206924336 0.207357676 0.210230620 0.215530498 0.216691802 0.217905328 0.219148645 0.220796589 0.225282153 0.226673004 0.232168029 0.235116784 0.235666327 0.235975592 0.244644919 0.256044978 0.257258032 0.263740237 0.269938168 0.280381335 0.283315159 0.286331355 0.291837414 0.296790722 0.304388808 0.305783276 0.307325683 0.314402087 0.316749141 0.317394718 0.322225964 0.330028150 0.332867923 0.351784540 0.352192241 0.355106680 0.355862729 0.360072416 0.362905248 0.364202853 0.384447725 0.386041731 0.392181498 0.410723827 0.425852293 0.430962058 0.462380975 0.468859320 0.478433588 0.483732294 0.484504724 0.487982774 0.491477495 0.509624031 0.515630430 0.535382446 0.569347751 0.575230094 0.592593899 0.594060402 0.607239288 0.608332777 0.644682626 0.647423739 0.649694735 0.674346180 0.678363879 0.685999196 0.692002375 0.693567599 0.700069290 0.704441416 0.718126307 0.742125919 0.751331128 0.759414162 0.769709667 0.773195858 0.779375127 0.810992706 0.815613698 0.819888595 0.822696131 0.823557566 0.831651857 0.834932539 0.837377796 0.842434516 0.845850849 0.847550035 0.849844846 0.859254179 0.865925470 0.867047148 0.874212734 0.885867371 0.886243477 0.889698897 0.899946364 0.901046685 0.904129734 0.923619150 0.927935888 0.936399253 0.937542555 0.966197119 0.976119726 0.986163072 1.001426887 1.019929778 1.028358283 1.042055201 1.050960258 1.057649781 1.068856471 1.086719097 1.088750870 1.104653626 1.107939914 1.112508452 1.125089534 1.135981071 1.139530706 1.144657799 1.175969181 1.179038499 1.181297601 1.186973587 1.191510412 1.196460397 1.224676789 1.228358579 1.275034166 1.302648945 1.320603156 1.328331217 1.333397181 1.336461803 1.337418744 1.342907433 1.343505657 1.345085874 1.359274981 1.378825570 1.383000406 1.385446562 1.415950783 1.420431333 1.436636668 1.551491532 1.682083782 1.776427835</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">252</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33271546" y3="0.03838313" z3="-0.18001006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37469573" y3="0.17643985" z3="0.43694429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63527237" y3="0.4440043" z3="-0.32407841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71471531" y3="1.22372589" z3="-2.24764705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38004183" y3="0.4147892" z3="-1.17433097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71941967" y3="0.82338373" z3="-3.65280913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.61689508" y3="1.73038064" z3="-3.11966989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36138153" y3="2.56475468" z3="-4.60005559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5501608" y3="1.22267043" z3="-4.36556093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48204594" y3="2.89602722" z3="-5.16115978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92473983" y3="-0.50635106" z3="-3.43861973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09323236" y3="0.01264204" z3="-0.99645031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40563185" y3="-1.13158161" z3="-2.00190459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93298136" y3="-1.01284987" z3="-1.82780458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11676405" y3="-2.45174902" z3="-1.85342596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13854502" y3="-3.59218079" z3="0.65186085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01580272" y3="-5.28552172" z3="-4.74737197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24473267" y3="-5.01393969" z3="-3.71324127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84277866" y3="-4.2890376" z3="-1.10266146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78289992" y3="-4.61739737" z3="-2.85952532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56465827" y3="-5.0741012" z3="-3.26112868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86449155" y3="-4.70549017" z3="-1.95200563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49570808" y3="-4.27058327" z3="-1.53774498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81915271" y3="-4.56072322" z3="-3.20139736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36593059" y3="-5.37978861" z3="-3.93723454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.9031144" y3="-4.72061974" z3="-1.61437564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02934287" y3="-3.83123442" z3="0.21525894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16725911" y3="-3.62147414" z3="0.86492265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05602477" y3="-4.08251041" z3="0.43149561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15816748" y3="-3.49401942" z3="2.33267812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.20844614" y3="-3.33164526" z3="5.13220371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35364999" y3="-3.69787267" z3="3.03736503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.98754943" y3="-3.21487022" z3="3.05387649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01008229" y3="-3.13450036" z3="4.44335589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37814026" y3="-3.61839833" z3="4.42694229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27113489" y3="-3.92889454" z3="2.48948644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.02845881" y3="-3.08282193" z3="2.54798256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.07866363" y3="-2.93825534" z3="4.98220824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31594035" y3="-3.78854347" z3="4.96284393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22528107" y3="-3.27716146" z3="6.2243089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41971178" y3="-3.91924614" z3="-0.63194075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18408907" y3="-3.42352007" z3="-1.08344952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51488472" y3="0.2150585" z3="-4.70951196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08343174" y3="-1.69062617" z3="0.02149052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88491186" y3="-0.94117197" z3="1.17998579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.81497128" y3="-0.29586423" z3="1.49428768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.33972785" y3="0.57493756" z3="1.19354065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.40326494" y3="1.45035223" z3="-0.44641301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.00457785" y3="-0.68427534" z3="1.40302584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33484043" y3="1.79234425" z3="2.61754435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.84388884" y3="-0.92728588" z3="2.09498447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.58716429" y3="-0.32245963" z3="3.35249834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18306451" y3="0.74363559" z3="-1.26456323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.38787133" y3="2.22276311" z3="-0.45616879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.37268252" y3="1.95284196" z3="-0.61043643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01437004" y3="-1.04457257" z3="2.44528708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.98371296" y3="-0.22865851" z3="1.17750491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8846707" y3="-1.52794027" z3="0.70408312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39547634" y3="1.27112776" z3="3.58921017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60123458" y3="2.38018061" z3="2.60939974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17672501" y3="2.50419264" z3="2.55038534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.72131407" y3="-0.79053003" z3="3.8474173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.49339611" y3="-0.48996835" z3="3.94966285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.40681862" y3="0.75855946" z3="3.23498316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83818984" y3="-0.72389335" z3="1.00113957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40907499" y3="-2.04940644" z3="0.85838895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75991646" y3="-2.6988018" z3="1.90102561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55700136" y3="-2.00984664" z3="3.09312126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0405736" y3="-0.7201951" z3="3.29300138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68937902" y3="-0.08423607" z3="2.23922256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50978551" y3="-2.54366346" z3="-0.1091408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36122088" y3="-3.70622097" z3="1.77475253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69772566" y3="-2.61182065" z3="4.11751286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86454745" y3="-0.21436848" z3="4.24353022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03576403" y3="0.9461887" z3="2.3584898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80605844" y3="0.43696878" z3="-4.29713785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78581792" y3="-0.52861662" z3="-4.48708033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43383998" y3="-1.72006063" z3="-5.11002658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14266276" y3="-1.9532132" z3="-5.57332052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82973914" y3="-0.98448641" z3="-5.36304087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.05490128" y3="1.36045304" z3="-3.76811675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80809877" y3="-0.38093566" z3="-4.13769423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44689056" y3="-2.76596031" z3="-5.26326987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09089199" y3="-2.89368302" z3="-6.07249137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85434468" y3="-1.17208926" z3="-5.68794666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36879903" y3="-1.91905891" z3="5.06049157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32185867" y3="-3.75325213" z3="3.94800255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21661209" y3="-3.66811837" z3="-6.03981952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45710948" y3="-2.6781143" z3="-4.59375167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05588641" y3="1.17445606" z3="-1.46880711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09477295" y3="1.55576506" z3="-2.44978383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42156318" y3="1.5218825" z3="-1.65934303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.82820544" y3="2.19700807" z3="-2.78421359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.14811994" y3="1.23020756" z3="-0.89465847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88212632" y3="2.45243782" z3="-2.92300482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55178742" y3="2.23520855" z3="-3.61344591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88048982" y3="2.54629084" z3="-3.77605201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83034704" y3="2.5010323" z3="-4.38961848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.20947073" y3="3.06096384" z3="-4.68273351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.37540459" y3="3.13378532" z3="-3.30988915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.25970794" y3="3.54166174" z3="-4.09892285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.17311654" y3="4.1483104" z3="-2.70847533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.91324167" y3="5.48054037" z3="-2.92695308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.00168104" y3="3.86273254" z3="-2.05848365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.54378833" y3="6.23758195" z3="-2.45404253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.02636289" y3="4.92616071" z3="-4.32059605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.83718879" y3="5.8795549" z3="-3.75474063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.17468163" y3="5.22033941" z3="-4.94181663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.64547756" y3="6.94260111" z3="-3.92803751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48867355" y3="-2.16168114" z3="-0.27433732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.47575209" y3="-2.9594074" z3="-1.03676582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00690063" y3="-2.53517897" z3="0.62350027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10403941" y3="-1.34029017" z3="-0.68801439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19648683" y3="-1.40006326" z3="-1.16279143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33614091" y3="-0.35961103" z3="-1.5115511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11779599" y3="-1.52767583" z3="-0.97208456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.45149205" y3="-2.05647419" z3="-2.00854626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3327,.0384,-.18;7.3747,.1764,.4369;6.6353,.444,-.3241;4.7147,1.2237,-2.2476;4.38,.4148,-1.1743;2.7194,.8234,-3.6528;3.6169,1.7304,-3.1197;1.3614,2.5648,-4.6001;1.5502,1.2227,-4.3656;.482,2.896,-5.1612;2.9247,-.5064,-3.4386;3.0932,.0126,-.9965;2.4056,-1.1316,-2.0019;.933,-1.0128,-1.8278;3.1168,-2.4517,-1.8534;-.1385,-3.5922,.6519;-.0158,-5.2855,-4.7474;-.2447,-5.0139,-3.7132;-.8428,-4.289,-1.1027;.7829,-4.6174,-2.8595;-1.5647,-5.0741,-3.2611;-1.8645,-4.7055,-1.952;.4957,-4.2706,-1.5377;1.8192,-4.5607,-3.2014;-2.3659,-5.3798,-3.9372;-2.9031,-4.7206,-1.6144;-1.0293,-3.8312,.2153;-2.1673,-3.6215,.8649;-3.056,-4.0825,.4315;-2.1582,-3.494,2.3327;-2.2084,-3.3316,5.1322;-3.3536,-3.6979,3.0374;-.9875,-3.2149,3.0539;-1.0101,-3.1345,4.4434;-3.3781,-3.6184,4.4269;-4.2711,-3.9289,2.4895;-.0285,-3.0828,2.548;-.0787,-2.9383,4.9822;-4.3159,-3.7885,4.9628;-2.2253,-3.2772,6.2243;1.4197,-3.9192,-.6319;2.1841,-3.4235,-1.0834;.5149,.2151,-4.7095;-3.0834,-1.6906,.0215;-2.8849,-.9412,1.18;-1.815,-.2959,1.4943;-.3397,.5749,1.1935;-.4033,1.4504,-.4464;1.0046,-.6843,1.403;-.3348,1.7923,2.6175;-3.8439,-.9273,2.095;-3.5872,-.3225,3.3525;-.1831,.7436,-1.2646;.3879,2.2228,-.4562;-1.3727,1.9528,-.6104;1.0144,-1.0446,2.4453;1.9837,-.2287,1.1775;.8847,-1.5279,.7041;-.3955,1.2711,3.5892;.6012,2.3802,2.6094;-1.1767,2.5042,2.5504;-2.7213,-.7905,3.8474;-4.4934,-.49,3.9497;-3.4068,.7586,3.235;4.8382,-.7239,1.0011;4.4091,-2.0494,.8584;3.7599,-2.6988,1.901;3.557,-2.0098,3.0931;4.0406,-.7202,3.293;4.6894,-.0842,2.2392;4.5098,-2.5437,-.1091;3.3612,-3.7062,1.7748;2.6977,-2.6118,4.1175;3.8645,-.2144,4.2435;5.0358,.9462,2.3585;-.8061,.437,-4.2971;-1.7858,-.5286,-4.4871;-1.4338,-1.7201,-5.11;-.1427,-1.9532,-5.5733;.8297,-.9845,-5.363;-1.0549,1.3605,-3.7681;-2.8081,-.3809,-4.1377;-2.4469,-2.766,-5.2633;.0909,-2.8937,-6.0725;1.8543,-1.1721,-5.6879;2.3688,-1.9191,5.0605;2.3219,-3.7533,3.948;-2.2166,-3.6681,-6.0398;-3.4571,-2.6781,-4.5938;7.0559,1.1745,-1.4688;6.0948,1.5558,-2.4498;8.4216,1.5219,-1.6593;8.8282,2.197,-2.7842;9.1481,1.2302,-.8947;9.8821,2.4524,-2.923;6.5518,2.2352,-3.6134;7.8805,2.5463,-3.7761;5.8303,2.501,-4.3896;8.2095,3.061,-4.6827;3.3754,3.1338,-3.3099;2.2597,3.5417,-4.0989;4.1731,4.1483,-2.7085;3.9132,5.4805,-2.927;5.0017,3.8627,-2.0585;4.5438,6.2376,-2.454;2.0264,4.9262,-4.3206;2.8372,5.8796,-3.7547;1.1747,5.2203,-4.9418;2.6455,6.9426,-3.928;-4.4887,-2.1617,-.2743;-4.4758,-2.9594,-1.0368;-5.0069,-2.5352,.6235;-5.104,-1.3403,-.688;-2.1965,-1.4001,-1.1628;-2.3361,-.3596,-1.5116;-1.1178,-1.5277,-.9721;-2.4515,-2.0565,-2.0085;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650392547002</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001958714868 0.000305416112 0.016641089206 0.005338046233</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030688258 -0.000668523 0.000067748 0.000175249 0.000221119 0.000314530 0.000355140 0.000431499 0.000596504 0.000817097 0.000932546 0.001052296 0.001207765 0.001322978 0.001369500 0.001403050 0.001562593 0.001784779 0.001853327 0.001945797 0.002166499 0.002343176 0.002577139 0.002671156 0.002689913 0.003017997 0.003118039 0.003427708 0.003518477 0.003904635 0.004454026 0.004717325 0.004768818 0.005083785 0.005989652 0.006120085 0.006230454 0.006644322 0.006953365 0.007741328 0.008110066 0.008230352 0.009312317 0.009521158 0.010053790 0.010588628 0.010734735 0.011111830 0.011832320 0.012260572 0.012952109 0.013112254 0.014074931 0.014580107 0.015326106 0.015521649 0.015865419 0.016339940 0.016986800 0.017490011 0.018147099 0.018547455 0.019479440 0.019619839 0.020049628 0.020824099 0.021223741 0.021419471 0.022598345 0.023155391 0.025045917 0.026302699 0.026791461 0.027663750 0.027806720 0.029524978 0.030236188 0.031621343 0.033294624 0.033626203 0.034024922 0.035790127 0.036948221 0.037714048 0.039585074 0.040061060 0.040855804 0.042346642 0.044192378 0.045093289 0.045441117 0.047119025 0.047943404 0.049245183 0.050448974 0.050998681 0.051229616 0.051524482 0.052483743 0.052689133 0.052924791 0.053114419 0.054729122 0.054944725 0.056014271 0.056273733 0.056531704 0.056710488 0.057219645 0.059103502 0.060501207 0.060931304 0.061710868 0.062360765 0.063317298 0.064524373 0.065363980 0.066054305 0.066542803 0.068348325 0.069087867 0.070292073 0.072740832 0.074503880 0.074790927 0.076356311 0.078459747 0.084061505 0.086543962 0.087108346 0.087615220 0.088935178 0.090566580 0.091261963 0.093885379 0.094730228 0.095739109 0.096421607 0.097850623 0.098820676 0.099276461 0.100184798 0.100851008 0.102472100 0.103211898 0.103586070 0.104288682 0.104520839 0.106328060 0.106963705 0.108098379 0.109770344 0.110943749 0.112292204 0.113022389 0.115040853 0.116189604 0.116802611 0.118705979 0.120760293 0.122079537 0.123152332 0.124441465 0.125896816 0.126230605 0.126634725 0.127165672 0.132036954 0.135079138 0.135809790 0.142794279 0.143756207 0.147065567 0.147604756 0.149731106 0.152863085 0.154670502 0.156281710 0.156739441 0.161543266 0.161898659 0.173762292 0.174223437 0.180877764 0.184845761 0.186349613 0.189612241 0.190394313 0.194119214 0.195108034 0.198631080 0.200274142 0.205250873 0.206927861 0.207357708 0.210230631 0.215634816 0.216695329 0.217909964 0.219149256 0.220796633 0.225283741 0.226678785 0.232173768 0.235116810 0.235680396 0.235978389 0.244649541 0.256050691 0.257260234 0.263756901 0.269945931 0.280391103 0.283315175 0.286331532 0.291839744 0.296790827 0.304390198 0.305785053 0.307326219 0.314427198 0.316749422 0.317395151 0.322226331 0.330056060 0.332868887 0.351788578 0.352202753 0.355114064 0.355862743 0.360073293 0.362919477 0.364206839 0.384447873 0.386048350 0.392181694 0.410724161 0.425864470 0.430962761 0.462382307 0.468876803 0.478454974 0.483738997 0.484519930 0.487999946 0.491477634 0.509624047 0.515634442 0.535399738 0.569389343 0.575241039 0.592596486 0.594063578 0.607260188 0.608361613 0.644683411 0.647487607 0.649699100 0.674346208 0.678377884 0.686012248 0.692002402 0.693580347 0.700070886 0.704441450 0.718150380 0.742168706 0.751331343 0.759418478 0.769712664 0.773195913 0.779443456 0.810993651 0.815643957 0.819890886 0.822734970 0.823561794 0.831658238 0.834939579 0.837545717 0.842440185 0.845850849 0.847551100 0.849846524 0.859254333 0.865927418 0.867060222 0.874213443 0.885867386 0.886244545 0.889700727 0.899955745 0.901054256 0.904131332 0.923658798 0.927935848 0.936436416 0.937558648 0.966197149 0.976126357 0.986194840 1.001484376 1.020001902 1.028360736 1.042055376 1.050962951 1.057656747 1.068857821 1.086744929 1.088752645 1.104669796 1.107959656 1.112508474 1.125169930 1.135981568 1.139583961 1.144658312 1.176095839 1.179038559 1.181331480 1.186984390 1.191527069 1.196468504 1.224684999 1.228359573 1.275034516 1.302670970 1.320733071 1.328342227 1.333397389 1.336464948 1.337671705 1.342925405 1.343514008 1.345087307 1.359277172 1.378833861 1.383000582 1.385464991 1.415963195 1.420432615 1.436636573 1.551492738 1.682150564 1.776428328</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">253</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33385925" y3="0.04014636" z3="-0.18240096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37699012" y3="0.17655543" z3="0.43409537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63763111" y3="0.44494289" z3="-0.3268078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.71739984" y3="1.22535721" z3="-2.25084574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38142196" y3="0.41748382" z3="-1.17665266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72041745" y3="0.82822798" z3="-3.65387078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6202" y3="1.73364327" z3="-3.1227221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36724899" y3="2.56860577" z3="-4.60567929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55145919" y3="1.22882898" z3="-4.36655871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48776742" y3="2.90184263" z3="-5.16533693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92422731" y3="-0.50220338" z3="-3.43935146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09387569" y3="0.01813599" z3="-0.99762536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40434653" y3="-1.12570744" z3="-2.00207709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93192905" y3="-1.00498228" z3="-1.82783887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11396416" y3="-2.44667059" z3="-1.85284908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13859919" y3="-3.59574328" z3="0.65498719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01249386" y3="-5.27959094" z3="-4.74670991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24175639" y3="-5.01070587" z3="-3.71206848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84046416" y3="-4.29307691" z3="-1.10013715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78513754" y3="-4.61229282" z3="-2.85807289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56078462" y3="-5.07673532" z3="-3.25966746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86120456" y3="-4.71159157" z3="-1.94981001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4976535" y3="-4.2690796" z3="-1.53559792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82058652" y3="-4.55057611" z3="-3.20022392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36139167" y3="-5.38359559" z3="-3.93618753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90044434" y3="-4.72916353" z3="-1.61185632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02832599" y3="-3.83674697" z3="0.21822242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16679213" y3="-3.62719291" z3="0.8670265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05513434" y3="-4.08833134" z3="0.43307587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15893216" y3="-3.49916414" z3="2.33468441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21188264" y3="-3.33568823" z3="5.13399486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35471335" y3="-3.70486021" z3="3.03843457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9893609" y3="-3.21741865" z3="3.05668267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01340072" y3="-3.13624865" z3="4.44600991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38033659" y3="-3.62517536" z3="4.4279548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27154095" y3="-3.93748458" z3="2.48982566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03008228" y3="-3.08346658" z3="2.55162354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08306964" y3="-2.93740512" z3="4.98537577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31807546" y3="-3.79730107" z3="4.96314687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22968255" y3="-3.28091532" z3="6.22603872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42040537" y3="-3.91497223" z3="-0.62975906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18228696" y3="-3.41658671" z3="-1.08139591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5145035" y3="0.22151095" z3="-4.70954089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08264409" y3="-1.69653237" z3="0.02279224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.88901451" y3="-0.94725066" z3="1.18232803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82054214" y3="-0.30035828" z3="1.5004081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.34698798" y3="0.57250316" z3="1.19874791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.41351982" y3="1.4506731" z3="-0.43955779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99996751" y3="-0.68467999" z3="1.40331731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34156292" y3="1.78738939" z3="2.62496172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85104831" y3="-0.93525469" z3="2.09404414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.59993645" y3="-0.33010493" z3="3.35252065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.18780691" y3="0.74671579" z3="-1.25858572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.37471028" y3="2.2272676" z3="-0.44660506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.38539738" y3="1.94927155" z3="-0.60442899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01371616" y3="-1.0452512" z3="2.44546596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97687534" y3="-0.22656932" z3="1.17494565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87965464" y3="-1.52841373" z3="0.70449452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40186617" y3="1.26445328" z3="3.59595243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59385228" y3="2.37597532" z3="2.61741716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18392374" y3="2.49903477" z3="2.55928798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.73449594" y3="-0.79656111" z3="3.85009156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.50770773" y3="-0.50025119" z3="3.94622079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4221403" y3="0.7514255" z3="3.23598642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83829657" y3="-0.72055113" z3="0.99944584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40835821" y3="-2.04612611" z3="0.85732448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75822204" y3="-2.69416124" z3="1.90015644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55466513" y3="-2.00383348" z3="3.09138746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0377855" y3="-0.71395636" z3="3.28986906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68791815" y3="-0.0792889" z3="2.23619691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5078821" y3="-2.54084768" z3="-0.11099867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35902625" y3="-3.70149471" z3="1.7745133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69549846" y3="-2.60489829" z3="4.116485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85897299" y3="-0.20643552" z3="4.23776364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03340193" y3="0.95138074" z3="2.35393584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80528215" y3="0.44358679" z3="-4.29413211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78549529" y3="-0.52207032" z3="-4.47889122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4353609" y3="-1.71383064" z3="-5.10302839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14586862" y3="-1.94702577" z3="-5.57108651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82745649" y3="-0.97810124" z3="-5.36295902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0524853" y3="1.36734229" z3="-3.76453401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80645426" y3="-0.37419107" z3="-4.12609909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44871558" y3="-2.76035542" z3="-5.25278138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08618832" y3="-2.8875305" z3="-6.07103335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85133986" y3="-1.16560459" z3="-5.69070416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36972607" y3="-1.91276485" z3="5.06176503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31838887" y3="-3.74537637" z3="3.94694461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22234704" y3="-3.66043894" z3="-6.03281052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45482794" y3="-2.67458468" z3="-4.57711058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.05907652" y3="1.17227387" z3="-1.47285434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.09819713" y3="1.55410501" z3="-2.45398101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42507805" y3="1.51449793" z3="-1.66480689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8326831" y3="2.18641562" z3="-2.79075286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15129968" y3="1.22218004" z3="-0.89999516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.88762597" y3="2.4414495" z3="-2.92963028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5563028" y3="2.2305408" z3="-3.61860387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.88554953" y3="2.5379873" z3="-3.78218506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83546044" y3="2.49815991" z3="-4.39459875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.21552881" y3="3.05441021" z3="-4.6888662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38246455" y3="3.1366304" z3="-3.31568223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26718276" y3="3.54573281" z3="-4.10453107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18267492" y3="4.1500734" z3="-2.71630819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9256003" y3="5.48213682" z3="-2.93716691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0103014" y3="3.86421093" z3="-2.06536449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55589468" y3="6.24070662" z3="-2.46254669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03493932" y3="4.93189099" z3="-4.32606351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84961736" y3="5.88253609" z3="-3.76452912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18420102" y3="5.2263441" z3="-4.94835894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66130261" y3="6.94502145" z3="-3.94026532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48624171" y3="-2.16960476" z3="-0.27830656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46892063" y3="-2.96569952" z3="-1.04196664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00659274" y3="-2.54560247" z3="0.61709503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10191335" y3="-1.34903474" z3="-0.69311473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19228073" y3="-1.40407441" z3="-1.15871386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3312102" y3="-0.36396069" z3="-1.50652207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1135139" y3="-1.53225905" z3="-0.96624688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.44495901" y3="-2.05933368" z3="-2.00613108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3339,.0401,-.1824;7.377,.1766,.4341;6.6376,.4449,-.3268;4.7174,1.2254,-2.2508;4.3814,.4175,-1.1767;2.7204,.8282,-3.6539;3.6202,1.7336,-3.1227;1.3672,2.5686,-4.6057;1.5515,1.2288,-4.3666;.4878,2.9018,-5.1653;2.9242,-.5022,-3.4394;3.0939,.0181,-.9976;2.4043,-1.1257,-2.0021;.9319,-1.005,-1.8278;3.114,-2.4467,-1.8528;-.1386,-3.5957,.655;-.0125,-5.2796,-4.7467;-.2418,-5.0107,-3.7121;-.8405,-4.2931,-1.1001;.7851,-4.6123,-2.8581;-1.5608,-5.0767,-3.2597;-1.8612,-4.7116,-1.9498;.4977,-4.2691,-1.5356;1.8206,-4.5506,-3.2002;-2.3614,-5.3836,-3.9362;-2.9004,-4.7292,-1.6119;-1.0283,-3.8367,.2182;-2.1668,-3.6272,.867;-3.0551,-4.0883,.4331;-2.1589,-3.4992,2.3347;-2.2119,-3.3357,5.134;-3.3547,-3.7049,3.0384;-.9894,-3.2174,3.0567;-1.0134,-3.1362,4.446;-3.3803,-3.6252,4.428;-4.2715,-3.9375,2.4898;-.0301,-3.0835,2.5516;-.0831,-2.9374,4.9854;-4.3181,-3.7973,4.9631;-2.2297,-3.2809,6.226;1.4204,-3.915,-.6298;2.1823,-3.4166,-1.0814;.5145,.2215,-4.7095;-3.0826,-1.6965,.0228;-2.889,-.9473,1.1823;-1.8205,-.3004,1.5004;-.347,.5725,1.1987;-.4135,1.4507,-.4396;1,-.6847,1.4033;-.3416,1.7874,2.625;-3.851,-.9353,2.094;-3.5999,-.3301,3.3525;-.1878,.7467,-1.2586;.3747,2.2273,-.4466;-1.3854,1.9493,-.6044;1.0137,-1.0453,2.4455;1.9769,-.2266,1.1749;.8797,-1.5284,.7045;-.4019,1.2645,3.596;.5939,2.376,2.6174;-1.1839,2.499,2.5593;-2.7345,-.7966,3.8501;-4.5077,-.5003,3.9462;-3.4221,.7514,3.236;4.8383,-.7206,.9994;4.4084,-2.0461,.8573;3.7582,-2.6942,1.9002;3.5547,-2.0038,3.0914;4.0378,-.714,3.2899;4.6879,-.0793,2.2362;4.5079,-2.5408,-.111;3.359,-3.7015,1.7745;2.6955,-2.6049,4.1165;3.859,-.2064,4.2378;5.0334,.9514,2.3539;-.8053,.4436,-4.2941;-1.7855,-.5221,-4.4789;-1.4354,-1.7138,-5.103;-.1459,-1.947,-5.5711;.8275,-.9781,-5.363;-1.0525,1.3673,-3.7645;-2.8065,-.3742,-4.1261;-2.4487,-2.7604,-5.2528;.0862,-2.8875,-6.071;1.8513,-1.1656,-5.6907;2.3697,-1.9128,5.0618;2.3184,-3.7454,3.9469;-2.2223,-3.6604,-6.0328;-3.4548,-2.6746,-4.5771;7.0591,1.1723,-1.4729;6.0982,1.5541,-2.454;8.4251,1.5145,-1.6648;8.8327,2.1864,-2.7908;9.1513,1.2222,-.9;9.8876,2.4414,-2.9296;6.5563,2.2305,-3.6186;7.8855,2.538,-3.7822;5.8355,2.4982,-4.3946;8.2155,3.0544,-4.6889;3.3825,3.1366,-3.3157;2.2672,3.5457,-4.1045;4.1827,4.1501,-2.7163;3.9256,5.4821,-2.9372;5.0103,3.8642,-2.0654;4.5559,6.2407,-2.4625;2.0349,4.9319,-4.3261;2.8496,5.8825,-3.7645;1.1842,5.2263,-4.9484;2.6613,6.945,-3.9403;-4.4862,-2.1696,-.2783;-4.4689,-2.9657,-1.042;-5.0066,-2.5456,.6171;-5.1019,-1.349,-.6931;-2.1923,-1.4041,-1.1587;-2.3312,-.364,-1.5065;-1.1135,-1.5323,-.9662;-2.445,-2.0593,-2.0061;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650401495184</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001806603818 0.000325047148 0.018110040364 0.005338165006</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030688108 -0.000431056 0.000067494 0.000139571 0.000213987 0.000316457 0.000355782 0.000430502 0.000595938 0.000824390 0.000934519 0.001052319 0.001209634 0.001323573 0.001370183 0.001403131 0.001562851 0.001785115 0.001858130 0.001945636 0.002166595 0.002343282 0.002577221 0.002672332 0.002690231 0.003018490 0.003118210 0.003428001 0.003518354 0.003905651 0.004453871 0.004719854 0.004768940 0.005084179 0.005989726 0.006120111 0.006234449 0.006646489 0.006953150 0.007741463 0.008112291 0.008230412 0.009314029 0.009526030 0.010059000 0.010594343 0.010734318 0.011125432 0.011835154 0.012262015 0.012957421 0.013112785 0.014082339 0.014581256 0.015343181 0.015522192 0.015870776 0.016346017 0.016989031 0.017490314 0.018148317 0.018549371 0.019482982 0.019633535 0.020053598 0.020825475 0.021223810 0.021422807 0.022598573 0.023157313 0.025050371 0.026305913 0.026792163 0.027663677 0.027806840 0.029525228 0.030276986 0.031628095 0.033294680 0.033631499 0.034042495 0.035790283 0.036969316 0.037716395 0.039585539 0.040062019 0.040862492 0.042346794 0.044193624 0.045094400 0.045448801 0.047120482 0.047943921 0.049245409 0.050450403 0.051002180 0.051230722 0.051540297 0.052484072 0.052689639 0.052925622 0.053114431 0.054729394 0.054944836 0.056015308 0.056273819 0.056533682 0.056712163 0.057221136 0.059110317 0.060506315 0.060936386 0.061710902 0.062361155 0.063318866 0.064524730 0.065367749 0.066054463 0.066542900 0.068354750 0.069088380 0.070299493 0.072742141 0.074503804 0.074791305 0.076372661 0.078460372 0.084062428 0.086545008 0.087109581 0.087617845 0.088955847 0.090569159 0.091262676 0.093904820 0.094733985 0.095772552 0.096421623 0.097851032 0.098820803 0.099276137 0.100187325 0.100854263 0.102475770 0.103212294 0.103586602 0.104310826 0.104536547 0.106330509 0.106969419 0.108114126 0.109772745 0.110945582 0.112308956 0.113022869 0.115042587 0.116191526 0.116810149 0.118706025 0.120761327 0.122153270 0.123155681 0.124471792 0.125968884 0.126233207 0.126634880 0.127171085 0.132037377 0.135079885 0.135810138 0.142796046 0.143756180 0.147069029 0.147604851 0.149731465 0.152869165 0.154670542 0.156286163 0.156741731 0.161546620 0.161900092 0.173762893 0.174224920 0.180931366 0.184849283 0.186364923 0.189612343 0.190395612 0.194122402 0.195161632 0.198644730 0.200275566 0.205252387 0.206933653 0.207358169 0.210230732 0.215748258 0.216696362 0.217914544 0.219149268 0.220797023 0.225285120 0.226685959 0.232181047 0.235116836 0.235690716 0.235983189 0.244656492 0.256055436 0.257262494 0.263782250 0.269956581 0.280407328 0.283316844 0.286331558 0.291844340 0.296791423 0.304392569 0.305787377 0.307326975 0.314445074 0.316750193 0.317395590 0.322226765 0.330085905 0.332870303 0.351790525 0.352225304 0.355121533 0.355863563 0.360073385 0.362935881 0.364216543 0.384447954 0.386052978 0.392181913 0.410724170 0.425879670 0.430962903 0.462386389 0.468903807 0.478478633 0.483751544 0.484529138 0.488033175 0.491477680 0.509624183 0.515639768 0.535423141 0.569455485 0.575243339 0.592596360 0.594065049 0.607271226 0.608383973 0.644683773 0.647560720 0.649702608 0.674346254 0.678385208 0.686017911 0.692002688 0.693592514 0.700071875 0.704442344 0.718165386 0.742214823 0.751332235 0.759423383 0.769713990 0.773196783 0.779503177 0.810994756 0.815666930 0.819899513 0.822774830 0.823563096 0.831671260 0.834945537 0.837684487 0.842444564 0.845850928 0.847551344 0.849848879 0.859255886 0.865928545 0.867084159 0.874214575 0.885871858 0.886251112 0.889703001 0.899957080 0.901062259 0.904132175 0.923705956 0.927937635 0.936451672 0.937573543 0.966197153 0.976144457 0.986234844 1.001554115 1.020055738 1.028366241 1.042056903 1.050965305 1.057660947 1.068858374 1.086773967 1.088753495 1.104683740 1.107967611 1.112508481 1.125280676 1.135982010 1.139736009 1.144661696 1.176202264 1.179038877 1.181378477 1.186989751 1.191542933 1.196487946 1.224690288 1.228362210 1.275034218 1.302683488 1.320896943 1.328354127 1.333397796 1.336470426 1.337893742 1.342949705 1.343519906 1.345087698 1.359284118 1.378855538 1.383001075 1.385491144 1.415977714 1.420435091 1.436637828 1.551493920 1.682292969 1.776428239</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">254</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33624813" y3="0.04173024" z3="-0.18610972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37980186" y3="0.17057562" z3="0.42756708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64040184" y3="0.44070703" z3="-0.33260431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72074129" y3="1.22730943" z3="-2.25437661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38391638" y3="0.42134579" z3="-1.17944184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72295291" y3="0.83175297" z3="-3.65696116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.624045" y3="1.73657839" z3="-3.12634928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.36911758" y3="2.57565101" z3="-4.60527187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55401047" y3="1.233471" z3="-4.36897163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.48975421" y3="2.90874906" z3="-5.1653029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9241556" y3="-0.49827632" z3="-3.44074322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0957053" y3="0.02429531" z3="-0.99949258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40405858" y3="-1.11942318" z3="-2.00263111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9319131" y3="-0.99643493" z3="-1.82785908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.11201834" y3="-2.44122164" z3="-1.85282319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13878132" y3="-3.6014163" z3="0.66027321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01216525" y3="-5.27520127" z3="-4.74516714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24142196" y3="-5.00890808" z3="-3.7097989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84040406" y3="-4.29704817" z3="-1.09602138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78465477" y3="-4.60718714" z3="-2.85661605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55993762" y3="-5.08081415" z3="-3.25571163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86023031" y3="-4.71905253" z3="-1.94479507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49710203" y3="-4.2665541" z3="-1.53334828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81995145" y3="-4.54149155" z3="-3.20016877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36018854" y3="-5.38996925" z3="-3.93157435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89811291" y3="-4.74358834" z3="-1.60528848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02852908" y3="-3.84273395" z3="0.22292702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16758617" y3="-3.63270996" z3="0.87054448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05537779" y3="-4.0949209" z3="0.43671464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.160849" y3="-3.50196215" z3="2.33794108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21580825" y3="-3.33100592" z3="5.13675614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35669515" y3="-3.70765801" z3="3.04149161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99233506" y3="-3.21639517" z3="3.05984208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01709065" y3="-3.1318548" z3="4.44899762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38345973" y3="-3.62402041" z3="4.43075828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27268214" y3="-3.94317711" z3="2.49295353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0331662" y3="-3.0819777" z3="2.55487921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08690107" y3="-2.93081927" z3="4.98822241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32156343" y3="-3.79546529" z3="4.96590133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23454215" y3="-3.27314234" z3="6.22862974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41958009" y3="-3.9093977" z3="-0.6282914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.18188538" y3="-3.41094822" z3="-1.08085754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51582054" y3="0.22747201" z3="-4.70907162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08165066" y3="-1.70406082" z3="0.02122022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89362372" y3="-0.95409202" z3="1.18133229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.82765019" y3="-0.30588198" z3="1.50434489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35378635" y3="0.56838278" z3="1.2044811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4225917" y3="1.45106007" z3="-0.43140394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99633464" y3="-0.68633324" z3="1.40415217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34945969" y3="1.77824747" z3="2.63476798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.85976667" y3="-0.94279004" z3="2.08883273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.61560661" y3="-0.33428426" z3="3.34720291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19131794" y3="0.75035586" z3="-1.25197709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35922037" y3="2.23309949" z3="-0.43459086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.39744152" y3="1.94283638" z3="-0.59658047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01422964" y3="-1.04699103" z3="2.44613185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.97237696" y3="-0.22641883" z3="1.17308967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87664197" y3="-1.53050715" z3="0.70596873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40854707" y3="1.25162004" z3="3.603594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58579648" y3="2.36746779" z3="2.62906845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19257401" y3="2.48903052" z3="2.57214451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.75127771" y3="-0.79716192" z3="3.84971601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.52581777" y3="-0.50493229" z3="3.93771916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.43970934" y3="0.74744101" z3="3.22900861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83948818" y3="-0.71813564" z3="0.9957089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40922239" y3="-2.04341526" z3="0.85434213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75848161" y3="-2.69077907" z3="1.89730011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55556191" y3="-2.000243" z3="3.08858606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03975133" y3="-0.71068729" z3="3.28688093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68988445" y3="-0.07661804" z3="2.23274212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51095236" y3="-2.53917773" z3="-0.11204462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35905146" y3="-3.69786572" z3="1.77208092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69506883" y3="-2.60015608" z3="4.11322739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8635322" y3="-0.20352703" z3="4.23671841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0371962" y3="0.9536801" z3="2.35103658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80273699" y3="0.44908229" z3="-4.28940394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78324477" y3="-0.51714403" z3="-4.47347096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43430942" y3="-1.70859591" z3="-5.09793286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14599464" y3="-1.94086284" z3="-5.56929812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82719106" y3="-0.97163695" z3="-5.36501643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04875729" y3="1.37242508" z3="-3.75890596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80355565" y3="-0.36995329" z3="-4.11832658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44720697" y3="-2.75582045" z3="-5.24436621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08505213" y3="-2.88113288" z3="-6.06996898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84994237" y3="-1.1586235" z3="-5.69588683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3707765" y3="-1.90811322" z3="5.058053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31314356" y3="-3.73941565" z3="3.94153246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22332742" y3="-3.65457752" z3="-6.02665312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45057129" y3="-2.67236261" z3="-4.5641593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06265827" y3="1.16815417" z3="-1.47868302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10194956" y3="1.55291204" z3="-2.45870331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.42962805" y3="1.50950185" z3="-1.67136832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8377103" y3="2.18183559" z3="-2.7973576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15587257" y3="1.2153026" z3="-0.90738081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89244616" y3="2.43284668" z3="-2.93761745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5604239" y3="2.22898053" z3="-3.62372403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89019745" y3="2.5341468" z3="-3.78833533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83919067" y3="2.49722358" z3="-4.39924724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22013657" y3="3.04613225" z3="-4.69594753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38724007" y3="3.14030535" z3="-3.31910221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27155284" y3="3.55058686" z3="-4.10697024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18954302" y3="4.15304176" z3="-2.72095921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93379822" y3="5.485726" z3="-2.94130089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01808427" y3="3.8658238" z3="-2.07167571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56744779" y3="6.24172857" z3="-2.47035185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04230279" y3="4.93571602" z3="-4.33024381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85755828" y3="5.88701677" z3="-3.76777632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19053177" y3="5.2318784" z3="-4.95041908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66925304" y3="6.95028076" z3="-3.94263965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48392223" y3="-2.17862554" z3="-0.28496948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.46344769" y3="-2.97265418" z3="-1.05099939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00596782" y3="-2.55763584" z3="0.60832888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10025536" y3="-1.35789144" z3="-0.69888253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18687511" y3="-1.41096297" z3="-1.15669577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32298495" y3="-0.36961273" z3="-1.50337635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1095026" y3="-1.53927919" z3="-0.95975461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43628469" y3="-2.06510561" z3="-2.00563474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3362,.0417,-.1861;7.3798,.1706,.4276;6.6404,.4407,-.3326;4.7207,1.2273,-2.2544;4.3839,.4213,-1.1794;2.723,.8318,-3.657;3.624,1.7366,-3.1263;1.3691,2.5757,-4.6053;1.554,1.2335,-4.369;.4898,2.9087,-5.1653;2.9242,-.4983,-3.4407;3.0957,.0243,-.9995;2.4041,-1.1194,-2.0026;.9319,-.9964,-1.8279;3.112,-2.4412,-1.8528;-.1388,-3.6014,.6603;-.0122,-5.2752,-4.7452;-.2414,-5.0089,-3.7098;-.8404,-4.297,-1.096;.7847,-4.6072,-2.8566;-1.5599,-5.0808,-3.2557;-1.8602,-4.7191,-1.9448;.4971,-4.2666,-1.5333;1.82,-4.5415,-3.2002;-2.3602,-5.39,-3.9316;-2.8981,-4.7436,-1.6053;-1.0285,-3.8427,.2229;-2.1676,-3.6327,.8705;-3.0554,-4.0949,.4367;-2.1608,-3.502,2.3379;-2.2158,-3.331,5.1368;-3.3567,-3.7077,3.0415;-.9923,-3.2164,3.0598;-1.0171,-3.1319,4.449;-3.3835,-3.624,4.4308;-4.2727,-3.9432,2.493;-.0332,-3.082,2.5549;-.0869,-2.9308,4.9882;-4.3216,-3.7955,4.9659;-2.2345,-3.2731,6.2286;1.4196,-3.9094,-.6283;2.1819,-3.4109,-1.0809;.5158,.2275,-4.7091;-3.0817,-1.7041,.0212;-2.8936,-.9541,1.1813;-1.8277,-.3059,1.5043;-.3538,.5684,1.2045;-.4226,1.4511,-.4314;.9963,-.6863,1.4042;-.3495,1.7782,2.6348;-3.8598,-.9428,2.0888;-3.6156,-.3343,3.3472;-.1913,.7504,-1.252;.3592,2.2331,-.4346;-1.3974,1.9428,-.5966;1.0142,-1.047,2.4461;1.9724,-.2264,1.1731;.8766,-1.5305,.706;-.4085,1.2516,3.6036;.5858,2.3675,2.6291;-1.1926,2.489,2.5721;-2.7513,-.7972,3.8497;-4.5258,-.5049,3.9377;-3.4397,.7474,3.229;4.8395,-.7181,.9957;4.4092,-2.0434,.8543;3.7585,-2.6908,1.8973;3.5556,-2.0002,3.0886;4.0398,-.7107,3.2869;4.6899,-.0766,2.2327;4.511,-2.5392,-.112;3.3591,-3.6979,1.7721;2.6951,-2.6002,4.1132;3.8635,-.2035,4.2367;5.0372,.9537,2.351;-.8027,.4491,-4.2894;-1.7832,-.5171,-4.4735;-1.4343,-1.7086,-5.0979;-.146,-1.9409,-5.5693;.8272,-.9716,-5.365;-1.0488,1.3724,-3.7589;-2.8036,-.37,-4.1183;-2.4472,-2.7558,-5.2444;.0851,-2.8811,-6.07;1.8499,-1.1586,-5.6959;2.3708,-1.9081,5.0581;2.3131,-3.7394,3.9415;-2.2233,-3.6546,-6.0267;-3.4506,-2.6724,-4.5642;7.0627,1.1682,-1.4787;6.1019,1.5529,-2.4587;8.4296,1.5095,-1.6714;8.8377,2.1818,-2.7974;9.1559,1.2153,-.9074;9.8924,2.4328,-2.9376;6.5604,2.229,-3.6237;7.8902,2.5341,-3.7883;5.8392,2.4972,-4.3992;8.2201,3.0461,-4.6959;3.3872,3.1403,-3.3191;2.2716,3.5506,-4.107;4.1895,4.153,-2.721;3.9338,5.4857,-2.9413;5.0181,3.8658,-2.0717;4.5674,6.2417,-2.4704;2.0423,4.9357,-4.3302;2.8576,5.887,-3.7678;1.1905,5.2319,-4.9504;2.6693,6.9503,-3.9426;-4.4839,-2.1786,-.285;-4.4634,-2.9727,-1.051;-5.006,-2.5576,.6083;-5.1003,-1.3579,-.6989;-2.1869,-1.411,-1.1567;-2.323,-.3696,-1.5034;-1.1095,-1.5393,-.9598;-2.4363,-2.0651,-2.0056;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650411736939</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001615818079 0.000297478634 0.018671925293 0.005333305123</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030688092 -0.000349549 0.000068038 0.000114577 0.000212977 0.000316374 0.000356834 0.000430188 0.000595731 0.000823826 0.000934224 0.001052550 0.001209634 0.001323926 0.001369905 0.001404910 0.001563105 0.001785116 0.001863049 0.001945566 0.002166899 0.002343371 0.002577375 0.002672539 0.002690459 0.003018870 0.003119426 0.003429141 0.003518488 0.003906821 0.004453863 0.004721101 0.004769258 0.005084507 0.005989954 0.006120277 0.006237160 0.006647225 0.006953179 0.007741518 0.008114931 0.008232149 0.009318317 0.009530123 0.010063742 0.010603813 0.010734780 0.011134806 0.011839251 0.012263144 0.012962371 0.013113193 0.014089679 0.014582206 0.015352123 0.015522381 0.015873240 0.016353198 0.016989649 0.017490591 0.018149014 0.018553089 0.019484605 0.019646038 0.020059566 0.020826380 0.021223853 0.021425160 0.022598890 0.023159307 0.025051364 0.026311897 0.026792690 0.027664086 0.027806994 0.029525275 0.030303095 0.031631368 0.033294686 0.033634483 0.034056551 0.035790675 0.036991854 0.037720013 0.039586106 0.040062726 0.040873941 0.042347018 0.044193231 0.045094356 0.045458494 0.047123324 0.047945928 0.049245925 0.050450177 0.051006182 0.051231465 0.051553916 0.052484322 0.052690210 0.052926351 0.053114443 0.054731160 0.054945136 0.056016848 0.056274047 0.056535776 0.056713009 0.057222172 0.059114237 0.060510394 0.060941965 0.061711051 0.062361169 0.063318789 0.064524708 0.065369114 0.066054408 0.066544856 0.068362466 0.069088872 0.070303193 0.072743459 0.074503802 0.074791385 0.076392981 0.078460742 0.084062964 0.086547166 0.087113610 0.087618946 0.088979582 0.090570715 0.091262657 0.093919747 0.094735096 0.095792496 0.096422020 0.097851101 0.098821755 0.099276694 0.100191055 0.100855778 0.102477632 0.103212790 0.103586648 0.104325934 0.104544106 0.106334280 0.106975260 0.108126509 0.109777631 0.110950596 0.112323543 0.113023277 0.115043294 0.116193091 0.116818719 0.118706216 0.120763809 0.122216143 0.123157915 0.124507844 0.126031672 0.126235228 0.126635043 0.127178078 0.132037495 0.135080366 0.135810357 0.142797124 0.143756497 0.147073152 0.147604972 0.149731684 0.152876939 0.154670955 0.156291659 0.156743670 0.161547257 0.161901506 0.173762803 0.174228070 0.180981558 0.184850341 0.186377475 0.189613011 0.190396468 0.194127696 0.195214665 0.198651126 0.200277218 0.205253409 0.206941969 0.207358715 0.210231080 0.215863934 0.216696425 0.217918557 0.219149290 0.220797588 0.225287777 0.226688863 0.232189743 0.235117823 0.235697126 0.235988347 0.244664012 0.256058871 0.257263530 0.263804830 0.269965360 0.280430188 0.283318718 0.286331615 0.291851450 0.296795013 0.304393836 0.305789875 0.307327106 0.314459095 0.316750700 0.317395621 0.322226969 0.330111536 0.332870323 0.351793415 0.352261594 0.355128988 0.355864975 0.360073667 0.362954871 0.364227946 0.384447999 0.386054860 0.392181905 0.410724821 0.425888630 0.430965418 0.462389599 0.468933867 0.478507454 0.483776198 0.484542332 0.488060308 0.491477791 0.509624191 0.515642725 0.535441181 0.569502112 0.575251315 0.592596180 0.594065510 0.607276756 0.608389925 0.644683961 0.647603177 0.649703971 0.674346620 0.678387749 0.686021290 0.692003096 0.693602203 0.700071973 0.704444611 0.718173858 0.742240512 0.751333597 0.759428216 0.769715073 0.773197979 0.779542827 0.810995585 0.815684230 0.819912006 0.822797055 0.823569993 0.831678060 0.834952465 0.837792122 0.842448766 0.845850948 0.847553207 0.849848956 0.859256551 0.865928949 0.867107987 0.874215290 0.885876902 0.886257032 0.889703961 0.899959658 0.901070932 0.904133808 0.923740434 0.927943244 0.936468306 0.937580380 0.966197218 0.976167932 0.986280921 1.001606577 1.020108214 1.028368931 1.042058050 1.050969774 1.057664637 1.068858458 1.086802330 1.088753558 1.104696959 1.107969165 1.112508483 1.125393516 1.135982192 1.139817709 1.144661818 1.176278157 1.179038992 1.181431669 1.186994952 1.191554284 1.196531575 1.224694504 1.228365251 1.275034916 1.302695723 1.321019435 1.328362282 1.333399990 1.336479590 1.338059935 1.343013097 1.343531267 1.345088222 1.359287291 1.378892883 1.383001449 1.385498331 1.415987586 1.420436066 1.436638558 1.551494785 1.682460662 1.776428120</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">255</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33968243" y3="0.04202871" z3="-0.18964118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38475443" y3="0.1693429" z3="0.42223158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64488913" y3="0.4411105" z3="-0.33693921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72384614" y3="1.22909049" z3="-2.25723244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38674203" y3="0.42325687" z3="-1.18192476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7243455" y3="0.83682166" z3="-3.65750014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62716957" y3="1.74017672" z3="-3.12821347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37342183" y3="2.58007243" z3="-4.60774565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5553454" y3="1.23989482" z3="-4.36866823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49363657" y3="2.91508511" z3="-5.16585323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92459778" y3="-0.49380771" z3="-3.44145614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0980714" y3="0.02873701" z3="-1.00036116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40335425" y3="-1.11344673" z3="-2.0030357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93158015" y3="-0.98710689" z3="-1.82795768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10853329" y3="-2.43679118" z3="-1.85325866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13991002" y3="-3.60611349" z3="0.66490396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01384718" y3="-5.26941711" z3="-4.74391809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24252738" y3="-5.0063677" z3="-3.70758758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84011087" y3="-4.3029468" z3="-1.09149692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78336918" y3="-4.6018496" z3="-2.85524594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55976379" y3="-5.08570055" z3="-3.25157517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85950496" y3="-4.72815202" z3="-1.93941742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49651351" y3="-4.26525014" z3="-1.53083582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81713083" y3="-4.52909276" z3="-3.20035006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35970568" y3="-5.39671755" z3="-3.92702686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89736058" y3="-4.75704877" z3="-1.59812084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02882208" y3="-3.84984832" z3="0.22786485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16834694" y3="-3.63829564" z3="0.87449725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05616863" y3="-4.10126485" z3="0.44127027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16232876" y3="-3.50417912" z3="2.34159434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21889182" y3="-3.32468293" z3="5.13987296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35846595" y3="-3.70883461" z3="3.04507016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99431286" y3="-3.21553859" z3="3.06334473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0200516" y3="-3.12639668" z3="4.45215374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3858485" y3="-3.62123786" z3="4.43412043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27407869" y3="-3.94672773" z3="2.49672147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03472933" y3="-3.0821847" z3="2.55861226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09057786" y3="-2.92226102" z3="4.99107323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32381152" y3="-3.79240074" z3="4.96926738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23830802" y3="-3.26330438" z3="6.23156375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41805288" y3="-3.9041513" z3="-0.6267945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17830085" y3="-3.40407274" z3="-1.08015177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51672344" y3="0.23336708" z3="-4.70944012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0806875" y3="-1.71130533" z3="0.02014204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89824918" y3="-0.96056337" z3="1.18059147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83316831" y3="-0.31237234" z3="1.50804514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36079977" y3="0.56409928" z3="1.21017392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43292832" y3="1.45134716" z3="-0.42299987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99241089" y3="-0.68849307" z3="1.40406877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35668912" y3="1.76861986" z3="2.64511278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86849639" y3="-0.94872389" z3="2.08364673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.631734" y3="-0.33682217" z3="3.34170203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19642491" y3="0.75415848" z3="-1.24488677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34563668" y3="2.23763749" z3="-0.42352285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41034721" y3="1.93863183" z3="-0.58824211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01463202" y3="-1.04966559" z3="2.44576947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96586558" y3="-0.22538369" z3="1.1702044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8726419" y3="-1.53280112" z3="0.70577535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41591154" y3="1.23784226" z3="3.61189128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57795741" y3="2.35843281" z3="2.64205891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20012022" y3="2.47948591" z3="2.58540569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76846603" y3="-0.79643379" z3="3.84928854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54411824" y3="-0.50888086" z3="3.92777632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45838127" y3="0.74507248" z3="3.22172875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8430759" y3="-0.71724823" z3="0.99279742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.411255" y3="-2.04218874" z3="0.85121877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.759084" y3="-2.68871929" z3="1.89369009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5559842" y3="-1.99768023" z3="3.08441887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0414953" y3="-0.70854458" z3="3.28280761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69310464" y3="-0.0752697" z3="2.22917196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51016423" y3="-2.53736256" z3="-0.11704657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35758296" y3="-3.6952408" z3="1.76767993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69491083" y3="-2.5968292" z3="4.10905111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86345553" y3="-0.20051335" z3="4.23061183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04010003" y3="0.95484664" z3="2.34655276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80130182" y3="0.45371586" z3="-4.28778255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78105834" y3="-0.51336845" z3="-4.46785501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43227982" y3="-1.70472711" z3="-5.09335161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14503638" y3="-1.9356602" z3="-5.56889948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82784441" y3="-0.96526289" z3="-5.36558878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04698535" y3="1.37683665" z3="-3.75640205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.80045102" y3="-0.36714546" z3="-4.10969336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44425573" y3="-2.75340924" z3="-5.23658978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08591855" y3="-2.87564693" z3="-6.07027005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85035722" y3="-1.15090159" z3="-5.69880612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37333836" y3="-1.905256" z3="5.05614087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31254491" y3="-3.73520676" z3="3.93781732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22200586" y3="-3.65130202" z3="-6.02028455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44522601" y3="-2.67162584" z3="-4.55282218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06694759" y3="1.16669717" z3="-1.48390541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10553616" y3="1.55238652" z3="-2.46306071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43401299" y3="1.50327122" z3="-1.67883184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84202393" y3="2.17372752" z3="-2.80560406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16068835" y3="1.20782734" z3="-0.91564349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8974894" y3="2.42362439" z3="-2.94690304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56399037" y3="2.22700246" z3="-3.62867368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89422798" y3="2.52921076" z3="-3.79502929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84261143" y3="2.49737065" z3="-4.4032528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2243366" y3="3.04400775" z3="-4.70245813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39252945" y3="3.14377339" z3="-3.32171476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27680367" y3="3.55503352" z3="-4.10887633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19637789" y3="4.15569935" z3="-2.7243477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94218814" y3="5.48819934" z3="-2.94527423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02492229" y3="3.86784395" z3="-2.07538635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57577157" y3="6.24501833" z3="-2.47297146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04776897" y3="4.94134259" z3="-4.33078607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86543215" y3="5.8906983" z3="-3.7705597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19642408" y3="5.23763066" z3="-4.95137901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67889566" y3="6.95362151" z3="-3.94597986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48073623" y3="-2.18751876" z3="-0.29221693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.455382" y3="-2.98238393" z3="-1.05699279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00712415" y3="-2.56631762" z3="0.59871952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09496667" y3="-1.36765161" z3="-0.71026081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18148134" y3="-1.41706446" z3="-1.15402671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31692818" y3="-0.37628222" z3="-1.50066538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10427251" y3="-1.54576449" z3="-0.95403138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42825001" y3="-2.07030352" z3="-2.0046369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3397,.042,-.1896;7.3848,.1693,.4222;6.6449,.4411,-.3369;4.7238,1.2291,-2.2572;4.3867,.4233,-1.1819;2.7243,.8368,-3.6575;3.6272,1.7402,-3.1282;1.3734,2.5801,-4.6077;1.5553,1.2399,-4.3687;.4936,2.9151,-5.1659;2.9246,-.4938,-3.4415;3.0981,.0287,-1.0004;2.4034,-1.1134,-2.003;.9316,-.9871,-1.828;3.1085,-2.4368,-1.8533;-.1399,-3.6061,.6649;-.0138,-5.2694,-4.7439;-.2425,-5.0064,-3.7076;-.8401,-4.3029,-1.0915;.7834,-4.6018,-2.8552;-1.5598,-5.0857,-3.2516;-1.8595,-4.7282,-1.9394;.4965,-4.2653,-1.5308;1.8171,-4.5291,-3.2004;-2.3597,-5.3967,-3.927;-2.8974,-4.757,-1.5981;-1.0288,-3.8498,.2279;-2.1683,-3.6383,.8745;-3.0562,-4.1013,.4413;-2.1623,-3.5042,2.3416;-2.2189,-3.3247,5.1399;-3.3585,-3.7088,3.0451;-.9943,-3.2155,3.0633;-1.0201,-3.1264,4.4522;-3.3858,-3.6212,4.4341;-4.2741,-3.9467,2.4967;-.0347,-3.0822,2.5586;-.0906,-2.9223,4.9911;-4.3238,-3.7924,4.9693;-2.2383,-3.2633,6.2316;1.4181,-3.9042,-.6268;2.1783,-3.4041,-1.0802;.5167,.2334,-4.7094;-3.0807,-1.7113,.0201;-2.8982,-.9606,1.1806;-1.8332,-.3124,1.508;-.3608,.5641,1.2102;-.4329,1.4513,-.423;.9924,-.6885,1.4041;-.3567,1.7686,2.6451;-3.8685,-.9487,2.0836;-3.6317,-.3368,3.3417;-.1964,.7542,-1.2449;.3456,2.2376,-.4235;-1.4103,1.9386,-.5882;1.0146,-1.0497,2.4458;1.9659,-.2254,1.1702;.8726,-1.5328,.7058;-.4159,1.2378,3.6119;.578,2.3584,2.6421;-1.2001,2.4795,2.5854;-2.7685,-.7964,3.8493;-4.5441,-.5089,3.9278;-3.4584,.7451,3.2217;4.8431,-.7172,.9928;4.4113,-2.0422,.8512;3.7591,-2.6887,1.8937;3.556,-1.9977,3.0844;4.0415,-.7085,3.2828;4.6931,-.0753,2.2292;4.5102,-2.5374,-.117;3.3576,-3.6952,1.7677;2.6949,-2.5968,4.1091;3.8635,-.2005,4.2306;5.0401,.9548,2.3466;-.8013,.4537,-4.2878;-1.7811,-.5134,-4.4679;-1.4323,-1.7047,-5.0934;-.145,-1.9357,-5.5689;.8278,-.9653,-5.3656;-1.047,1.3768,-3.7564;-2.8005,-.3671,-4.1097;-2.4443,-2.7534,-5.2366;.0859,-2.8756,-6.0703;1.8504,-1.1509,-5.6988;2.3733,-1.9053,5.0561;2.3125,-3.7352,3.9378;-2.222,-3.6513,-6.0203;-3.4452,-2.6716,-4.5528;7.0669,1.1667,-1.4839;6.1055,1.5524,-2.4631;8.434,1.5033,-1.6788;8.842,2.1737,-2.8056;9.1607,1.2078,-.9156;9.8975,2.4236,-2.9469;6.564,2.227,-3.6287;7.8942,2.5292,-3.795;5.8426,2.4974,-4.4033;8.2243,3.044,-4.7025;3.3925,3.1438,-3.3217;2.2768,3.555,-4.1089;4.1964,4.1557,-2.7243;3.9422,5.4882,-2.9453;5.0249,3.8678,-2.0754;4.5758,6.245,-2.473;2.0478,4.9413,-4.3308;2.8654,5.8907,-3.7706;1.1964,5.2376,-4.9514;2.6789,6.9536,-3.946;-4.4807,-2.1875,-.2922;-4.4554,-2.9824,-1.057;-5.0071,-2.5663,.5987;-5.095,-1.3677,-.7103;-2.1815,-1.4171,-1.154;-2.3169,-.3763,-1.5007;-1.1043,-1.5458,-.954;-2.4283,-2.0703,-2.0046;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418155068</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001812849945 0.000282363171 0.016655624043 0.005336765966</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689131 -0.000531446 0.000035601 0.000060058 0.000247219 0.000289249 0.000355835 0.000430813 0.000599387 0.000824206 0.000935975 0.001042182 0.001211425 0.001319710 0.001371324 0.001409287 0.001559304 0.001783335 0.001871087 0.001930874 0.002154759 0.002339502 0.002578397 0.002663606 0.002682637 0.003021703 0.003123036 0.003428693 0.003518597 0.003906716 0.004453931 0.004722533 0.004749081 0.005084311 0.005983423 0.006114477 0.006238507 0.006648293 0.006953290 0.007741345 0.008118478 0.008231445 0.009323241 0.009497380 0.010067199 0.010559594 0.010713683 0.011131239 0.011847929 0.012259876 0.012965247 0.013112438 0.014103876 0.014583911 0.015350299 0.015521364 0.015874457 0.016360055 0.016959522 0.017490030 0.018149800 0.018551684 0.019483044 0.019641934 0.020068859 0.020823205 0.021224170 0.021425573 0.022593353 0.023160220 0.025010378 0.026316445 0.026793128 0.027661081 0.027810434 0.029525243 0.030314585 0.031635120 0.033294388 0.033638492 0.034070200 0.035790452 0.037013782 0.037706721 0.039583864 0.040061826 0.040878492 0.042354046 0.044070486 0.045001859 0.045450839 0.047124798 0.047947641 0.049246349 0.050450333 0.051009449 0.051232884 0.051559096 0.052484432 0.052690947 0.052926367 0.053112125 0.054732433 0.054945302 0.056019342 0.056274410 0.056538838 0.056712875 0.057222499 0.059118914 0.060519784 0.060949436 0.061712200 0.062360349 0.063319156 0.064523018 0.065360847 0.066044439 0.066546659 0.068371404 0.069087686 0.070303405 0.072744181 0.074501812 0.074792460 0.076420436 0.078464263 0.084065014 0.086555096 0.087117334 0.087614987 0.089031575 0.090571561 0.091269169 0.093940454 0.094735313 0.095793957 0.096423117 0.097850373 0.098823168 0.099289196 0.100193970 0.100865960 0.102478727 0.103211592 0.103588061 0.104344812 0.104565299 0.106341005 0.106979891 0.108138073 0.109784064 0.110958653 0.112340872 0.113031409 0.115043939 0.116197346 0.116824296 0.118706021 0.120770514 0.122260781 0.123163807 0.124544006 0.126078997 0.126241486 0.126638964 0.127191972 0.132038554 0.135081814 0.135810876 0.142798695 0.143758896 0.147075304 0.147611208 0.149731750 0.152858050 0.154671383 0.156236651 0.156703469 0.161547440 0.161899834 0.173761482 0.174239120 0.181026103 0.184849258 0.186392711 0.189614264 0.190397582 0.194134339 0.195259577 0.198653629 0.200280822 0.205253606 0.206952299 0.207360646 0.210231403 0.215985547 0.216698669 0.217927451 0.219161560 0.220798512 0.225287648 0.226694391 0.232198846 0.235117618 0.235700171 0.235991088 0.244672744 0.256061232 0.257263929 0.263833164 0.269972401 0.280462479 0.283323666 0.286332208 0.291862465 0.296800897 0.304395075 0.305792870 0.307325548 0.314463449 0.316751162 0.317395722 0.322228143 0.330129253 0.332869456 0.351800169 0.352306832 0.355134607 0.355865509 0.360075414 0.362971465 0.364236816 0.384435200 0.386055874 0.392182108 0.410717777 0.425894253 0.430963488 0.462393896 0.468972432 0.478535138 0.483813556 0.484544532 0.488054356 0.491477524 0.509624005 0.515646984 0.535460532 0.569546216 0.575241474 0.592545109 0.594066890 0.607271988 0.608392340 0.644685056 0.647631029 0.649706324 0.674345481 0.678386832 0.686022521 0.692005124 0.693616417 0.700069811 0.704450494 0.718172351 0.742252665 0.751335770 0.759433055 0.769716678 0.773200456 0.779562481 0.810996522 0.815697968 0.819918341 0.822811393 0.823569583 0.831692292 0.834959796 0.837850935 0.842453589 0.845851740 0.847551037 0.849850288 0.859260129 0.865928580 0.867158049 0.874216367 0.885895398 0.886269002 0.889706843 0.899960377 0.901076830 0.904134763 0.923767258 0.927953446 0.936473957 0.937596374 0.966197899 0.976200427 0.986331655 1.001647346 1.020141510 1.028372666 1.042061027 1.050975005 1.057667196 1.068859659 1.086828145 1.088753504 1.104709760 1.107972410 1.112508853 1.125507440 1.135982618 1.139946974 1.144669537 1.176318466 1.179039731 1.181490564 1.186998731 1.191568453 1.196594397 1.224698070 1.228364420 1.274980194 1.302704224 1.321137512 1.328370907 1.333385989 1.336483889 1.338195338 1.343026890 1.343504433 1.345084860 1.359289640 1.378945826 1.383001616 1.385500319 1.415847032 1.420438166 1.436413677 1.551494855 1.682667198 1.776393118</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">256</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34080839" y3="0.04614755" z3="-0.19100743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38606586" y3="0.16693801" z3="0.41885812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64634092" y3="0.43936568" z3="-0.34021449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72671885" y3="1.23179072" z3="-2.25974882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38835387" y3="0.42844388" z3="-1.18316625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72716656" y3="0.83953247" z3="-3.66026047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63101743" y3="1.74288147" z3="-3.13193539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37773311" y3="2.58471687" z3="-4.61197499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55910643" y3="1.24276942" z3="-4.37284594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49866964" y3="2.9191908" z3="-5.17168243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92456606" y3="-0.49068733" z3="-3.44117107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09898786" y3="0.03586537" z3="-1.00078707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4022795" y3="-1.10675942" z3="-2.00161593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9307794" y3="-0.97771819" z3="-1.82635844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1054853" y3="-2.43103037" z3="-1.85038747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1411823" y3="-3.61014607" z3="0.66689935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01330848" y3="-5.26415354" z3="-4.7446589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24230069" y3="-5.0034452" z3="-3.7078253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8408914" y3="-4.30532933" z3="-1.09048103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78265671" y3="-4.59695016" z3="-2.85542944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55905667" y3="-5.08720664" z3="-3.25132846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85920428" y3="-4.7325106" z3="-1.93840709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49538372" y3="-4.2628516" z3="-1.53044684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81681014" y3="-4.52234062" z3="-3.20109449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3584612" y3="-5.39928085" z3="-3.92694956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89634583" y3="-4.76579764" z3="-1.59667626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02997926" y3="-3.85447822" z3="0.22955355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16988546" y3="-3.64356937" z3="0.87567713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05710874" y3="-4.10747091" z3="0.44242838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16393326" y3="-3.50909006" z3="2.34276441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22070688" y3="-3.32669557" z3="5.14082851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35958094" y3="-3.71531277" z3="3.04652634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99652325" y3="-3.21755297" z3="3.06408674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02215096" y3="-3.12717486" z3="4.45284775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38716336" y3="-3.62616276" z3="4.43546659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27485459" y3="-3.95516873" z3="2.49838898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03744596" y3="-3.08248322" z3="2.55921563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09265328" y3="-2.92121337" z3="4.99140643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32512705" y3="-3.79786514" z3="4.97092284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24031103" y3="-3.26395447" z3="6.23243586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41630969" y3="-3.90023711" z3="-0.6261637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17658304" y3="-3.39885254" z3="-1.07925037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51890951" y3="0.23766242" z3="-4.70968946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08123884" y3="-1.71732437" z3="0.02016546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90261954" y3="-0.96750195" z3="1.18184845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83933246" y3="-0.31908145" z3="1.51343165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3674635" y3="0.56036659" z3="1.21830886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44142696" y3="1.45325402" z3="-0.41179804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9891909" y3="-0.68935943" z3="1.40610494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36602837" y3="1.75890724" z3="2.65811572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87581051" y3="-0.95708449" z3="2.08161067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64409191" y3="-0.34413508" z3="3.34009362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20251991" y3="0.75928339" z3="-1.23605704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3337152" y3="2.24211516" z3="-0.40882974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42028269" y3="1.93765951" z3="-0.57592727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01511749" y3="-1.0525508" z3="2.44696235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96168795" y3="-0.22373739" z3="1.17094879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87025225" y3="-1.53278705" z3="0.70665426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42307383" y3="1.22361877" z3="3.62247456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56707974" y3="2.35138914" z3="2.65713768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21172449" y3="2.46710112" z3="2.60206131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78165993" y3="-0.80177361" z3="3.85066917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5582548" y3="-0.51713143" z3="3.92383066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47219988" y3="0.73816364" z3="3.22023417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84262221" y3="-0.7119226" z3="0.99141594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41074497" y3="-2.03682212" z3="0.85069543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75904862" y3="-2.68281738" z3="1.89387348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55716274" y3="-1.9915247" z3="3.08505678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0425135" y3="-0.70232766" z3="3.28242818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69340837" y3="-0.0695" z3="2.22799974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51264176" y3="-2.53349699" z3="-0.11490725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35864988" y3="-3.68947479" z3="1.76919088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69587106" y3="-2.59001493" z3="4.1099168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86703006" y3="-0.19450441" z3="4.23202578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04216377" y3="0.9604456" z3="2.34594143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79765292" y3="0.45905802" z3="-4.28399229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77849741" y3="-0.5079043" z3="-4.46300273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43188225" y3="-1.69947859" z3="-5.08839396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1459212" y3="-1.93111347" z3="-5.56638715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82770007" y3="-0.96135111" z3="-5.36711038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0413822" y3="1.38241421" z3="-3.75249482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79702347" y3="-0.36108648" z3="-4.10261951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44443395" y3="-2.74790734" z3="-5.22914611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08323033" y3="-2.87139122" z3="-6.06810243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84899875" y3="-1.14792274" z3="-5.70259698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37543468" y3="-1.89871339" z3="5.05634273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30900574" y3="-3.72754022" z3="3.93631334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2262998" y3="-3.64340344" z3="-6.01676428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44152228" y3="-2.66857439" z3="-4.5394846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06962297" y3="1.16378042" z3="-1.48791719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1088778" y3="1.55154219" z3="-2.46670937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43772578" y3="1.49885882" z3="-1.68363664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84670758" y3="2.16802999" z3="-2.81126523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1640432" y3="1.20237382" z3="-0.92062638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90219419" y3="2.41434208" z3="-2.9537324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56820039" y3="2.22409659" z3="-3.63349283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89897766" y3="2.52327053" z3="-3.80096583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84687012" y3="2.49457153" z3="-4.408112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22943287" y3="3.03242863" z3="-4.70986061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39841896" y3="3.14664656" z3="-3.32819622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28318315" y3="3.55838955" z3="-4.11599978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20431052" y3="4.15823501" z3="-2.7332038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95185978" y3="5.49119478" z3="-2.9559301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03255295" y3="3.87011535" z3="-2.08394082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58759171" y3="6.24693015" z3="-2.48648054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05720674" y3="4.94399307" z3="-4.3414319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8757602" y3="5.89382266" z3="-3.78197519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20582793" y3="5.24119361" z3="-4.96163822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69022226" y3="6.95712053" z3="-3.95872286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48070032" y3="-2.19379957" z3="-0.29622051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4533282" y3="-2.98505031" z3="-1.06462602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00734751" y3="-2.57674986" z3="0.59253688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09638624" y3="-1.37319644" z3="-0.7115345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17922925" y3="-1.42109716" z3="-1.15142384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31255717" y3="-0.37856703" z3="-1.49552094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1030178" y3="-1.55005332" z3="-0.94853867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.423841" y3="-2.0720877" z3="-2.00386149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,.0461,-.191;7.3861,.1669,.4189;6.6463,.4394,-.3402;4.7267,1.2318,-2.2597;4.3884,.4284,-1.1832;2.7272,.8395,-3.6603;3.631,1.7429,-3.1319;1.3777,2.5847,-4.612;1.5591,1.2428,-4.3728;.4987,2.9192,-5.1717;2.9246,-.4907,-3.4412;3.099,.0359,-1.0008;2.4023,-1.1068,-2.0016;.9308,-.9777,-1.8264;3.1055,-2.431,-1.8504;-.1412,-3.6101,.6669;-.0133,-5.2642,-4.7447;-.2423,-5.0034,-3.7078;-.8409,-4.3053,-1.0905;.7827,-4.597,-2.8554;-1.5591,-5.0872,-3.2513;-1.8592,-4.7325,-1.9384;.4954,-4.2629,-1.5304;1.8168,-4.5223,-3.2011;-2.3585,-5.3993,-3.9269;-2.8963,-4.7658,-1.5967;-1.03,-3.8545,.2296;-2.1699,-3.6436,.8757;-3.0571,-4.1075,.4424;-2.1639,-3.5091,2.3428;-2.2207,-3.3267,5.1408;-3.3596,-3.7153,3.0465;-.9965,-3.2176,3.0641;-1.0222,-3.1272,4.4528;-3.3872,-3.6262,4.4355;-4.2749,-3.9552,2.4984;-.0374,-3.0825,2.5592;-.0927,-2.9212,4.9914;-4.3251,-3.7979,4.9709;-2.2403,-3.264,6.2324;1.4163,-3.9002,-.6262;2.1766,-3.3989,-1.0793;.5189,.2377,-4.7097;-3.0812,-1.7173,.0202;-2.9026,-.9675,1.1818;-1.8393,-.3191,1.5134;-.3675,.5604,1.2183;-.4414,1.4533,-.4118;.9892,-.6894,1.4061;-.366,1.7589,2.6581;-3.8758,-.9571,2.0816;-3.6441,-.3441,3.3401;-.2025,.7593,-1.2361;.3337,2.2421,-.4088;-1.4203,1.9377,-.5759;1.0151,-1.0526,2.447;1.9617,-.2237,1.1709;.8703,-1.5328,.7067;-.4231,1.2236,3.6225;.5671,2.3514,2.6571;-1.2117,2.4671,2.6021;-2.7817,-.8018,3.8507;-4.5583,-.5171,3.9238;-3.4722,.7382,3.2202;4.8426,-.7119,.9914;4.4107,-2.0368,.8507;3.759,-2.6828,1.8939;3.5572,-1.9915,3.0851;4.0425,-.7023,3.2824;4.6934,-.0695,2.228;4.5126,-2.5335,-.1149;3.3586,-3.6895,1.7692;2.6959,-2.59,4.1099;3.867,-.1945,4.232;5.0422,.9604,2.3459;-.7977,.4591,-4.284;-1.7785,-.5079,-4.463;-1.4319,-1.6995,-5.0884;-.1459,-1.9311,-5.5664;.8277,-.9614,-5.3671;-1.0414,1.3824,-3.7525;-2.797,-.3611,-4.1026;-2.4444,-2.7479,-5.2291;.0832,-2.8714,-6.0681;1.849,-1.1479,-5.7026;2.3754,-1.8987,5.0563;2.309,-3.7275,3.9363;-2.2263,-3.6434,-6.0168;-3.4415,-2.6686,-4.5395;7.0696,1.1638,-1.4879;6.1089,1.5515,-2.4667;8.4377,1.4989,-1.6836;8.8467,2.168,-2.8113;9.164,1.2024,-.9206;9.9022,2.4143,-2.9537;6.5682,2.2241,-3.6335;7.899,2.5233,-3.801;5.8469,2.4946,-4.4081;8.2294,3.0324,-4.7099;3.3984,3.1466,-3.3282;2.2832,3.5584,-4.116;4.2043,4.1582,-2.7332;3.9519,5.4912,-2.9559;5.0326,3.8701,-2.0839;4.5876,6.2469,-2.4865;2.0572,4.944,-4.3414;2.8758,5.8938,-3.782;1.2058,5.2412,-4.9616;2.6902,6.9571,-3.9587;-4.4807,-2.1938,-.2962;-4.4533,-2.9851,-1.0646;-5.0073,-2.5767,.5925;-5.0964,-1.3732,-.7115;-2.1792,-1.4211,-1.1514;-2.3126,-.3786,-1.4955;-1.103,-1.5501,-.9485;-2.4238,-2.0721,-2.0039;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417460907</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002336788105 0.000301891475 0.015374965866 0.005333546763</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689350 -0.000350902 0.000042773 0.000056936 0.000255040 0.000328663 0.000360126 0.000432030 0.000602553 0.000824510 0.000936046 0.001042144 0.001212868 0.001322793 0.001371350 0.001411409 0.001559359 0.001783369 0.001873647 0.001930635 0.002154661 0.002339465 0.002578112 0.002664148 0.002682612 0.003022100 0.003124092 0.003428502 0.003518645 0.003908367 0.004454064 0.004724969 0.004749138 0.005084562 0.005988815 0.006114526 0.006239041 0.006648296 0.006953886 0.007741664 0.008120196 0.008232945 0.009325746 0.009500873 0.010069756 0.010567841 0.010714962 0.011133742 0.011855490 0.012260041 0.012966802 0.013115333 0.014115460 0.014585038 0.015353975 0.015521477 0.015875539 0.016367377 0.016958238 0.017490716 0.018150230 0.018555135 0.019484575 0.019646279 0.020076353 0.020823366 0.021224162 0.021425469 0.022594786 0.023162218 0.025009774 0.026325920 0.026793799 0.027662123 0.027815390 0.029525326 0.030320551 0.031636447 0.033294696 0.033640503 0.034078719 0.035790691 0.037028809 0.037712779 0.039584538 0.040062142 0.040887818 0.042359763 0.044071635 0.045003420 0.045456517 0.047126248 0.047950184 0.049247820 0.050451172 0.051011023 0.051233637 0.051561693 0.052484440 0.052691380 0.052926478 0.053112772 0.054733545 0.054945670 0.056020169 0.056274678 0.056541493 0.056713226 0.057222519 0.059120005 0.060526795 0.060953839 0.061712710 0.062360633 0.063320362 0.064523366 0.065360835 0.066044430 0.066549048 0.068376226 0.069088280 0.070306017 0.072744889 0.074502037 0.074792511 0.076440044 0.078466916 0.084066442 0.086563109 0.087121724 0.087615211 0.089070321 0.090572616 0.091280965 0.093954209 0.094735814 0.095798110 0.096424587 0.097850531 0.098826133 0.099295895 0.100194668 0.100869741 0.102479081 0.103211602 0.103589744 0.104352526 0.104569734 0.106343909 0.106982624 0.108145249 0.109787682 0.110968794 0.112353366 0.113046734 0.115044784 0.116199245 0.116825268 0.118706059 0.120776438 0.122283859 0.123164431 0.124574013 0.126113037 0.126246547 0.126639998 0.127202014 0.132038895 0.135082950 0.135811038 0.142799165 0.143761556 0.147076710 0.147611241 0.149732165 0.152862593 0.154671596 0.156237382 0.156704100 0.161548716 0.161900196 0.173761872 0.174250524 0.181066101 0.184849515 0.186395396 0.189614492 0.190397741 0.194139680 0.195293813 0.198653536 0.200284059 0.205253801 0.206961967 0.207362650 0.210231663 0.216086921 0.216702562 0.217933886 0.219163943 0.220802009 0.225288335 0.226694984 0.232208504 0.235118052 0.235700597 0.235993256 0.244679808 0.256063839 0.257264189 0.263855858 0.269976745 0.280499297 0.283326010 0.286332631 0.291873584 0.296812567 0.304395702 0.305793940 0.307326103 0.314465390 0.316752115 0.317395801 0.322228289 0.330144491 0.332869439 0.351803344 0.352363099 0.355139712 0.355870793 0.360075947 0.362989534 0.364244846 0.384435257 0.386056571 0.392182202 0.410719682 0.425895382 0.430966322 0.462399068 0.469010987 0.478556033 0.483862961 0.484548578 0.488082612 0.491477693 0.509624009 0.515650957 0.535477838 0.569577431 0.575245879 0.592548948 0.594067054 0.607272521 0.608392513 0.644685306 0.647649929 0.649706299 0.674346109 0.678387906 0.686023880 0.692005134 0.693620275 0.700071680 0.704461386 0.718172224 0.742259060 0.751339940 0.759435618 0.769718256 0.773202795 0.779569976 0.810997572 0.815702832 0.819925387 0.822817209 0.823569692 0.831701468 0.834964371 0.837887830 0.842455248 0.845852167 0.847551303 0.849850334 0.859262985 0.865929683 0.867201177 0.874217505 0.885914633 0.886278124 0.889707788 0.899960524 0.901082692 0.904134964 0.923786618 0.927965341 0.936474752 0.937609538 0.966198364 0.976240871 0.986388383 1.001679154 1.020162899 1.028374224 1.042063688 1.050978215 1.057667948 1.068859731 1.086849252 1.088754002 1.104715076 1.107979147 1.112509378 1.125647188 1.135982648 1.140050960 1.144671473 1.176339840 1.179040894 1.181546766 1.186999036 1.191575182 1.196705111 1.224699957 1.228365546 1.274980771 1.302705175 1.321238661 1.328376074 1.333389552 1.336489771 1.338277359 1.343103700 1.343512372 1.345084996 1.359291703 1.379017476 1.383001949 1.385500624 1.415847110 1.420438344 1.436420616 1.551494910 1.682994746 1.776397147</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">257</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34064818" y3="0.04923546" z3="-0.19299888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38684239" y3="0.16701311" z3="0.41671732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64762326" y3="0.44164713" z3="-0.34200452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72886065" y3="1.2352407" z3="-2.26231423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38878184" y3="0.43334824" z3="-1.18508179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72904331" y3="0.84591509" z3="-3.66228655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63434844" y3="1.74786388" z3="-3.13511922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38303093" y3="2.59071983" z3="-4.61721343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56149946" y3="1.25044632" z3="-4.37491103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50416608" y3="2.92658224" z3="-5.17627656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92477445" y3="-0.4844921" z3="-3.44205014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0987131" y3="0.04410473" z3="-1.00231756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40063421" y3="-1.09833555" z3="-2.00231325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92925745" y3="-0.96699732" z3="-1.82840412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10204641" y3="-2.42338056" z3="-1.84933741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14211738" y3="-3.61612783" z3="0.67311825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01415999" y3="-5.25738401" z3="-4.74276693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2427103" y3="-4.99990805" z3="-3.70499494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84062415" y3="-4.30978421" z3="-1.08543812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78172689" y3="-4.58981223" z3="-2.85354895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55846198" y3="-5.09119451" z3="-3.24651182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85830199" y3="-4.74071334" z3="-1.93244418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49477121" y3="-4.25953835" z3="-1.52750811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81391087" y3="-4.50696566" z3="-3.20069261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3572083" y3="-5.40592911" z3="-3.92158062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89475489" y3="-4.78009504" z3="-1.58878364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03042601" y3="-3.86109701" z3="0.2352453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17078835" y3="-3.64909088" z3="0.88047578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05817583" y3="-4.11303301" z3="0.447275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16561979" y3="-3.51275348" z3="2.34734691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22324482" y3="-3.32551101" z3="5.14507407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36146908" y3="-3.71839658" z3="3.05100777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99850395" y3="-3.21948726" z3="3.0686316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02468217" y3="-3.12639802" z3="4.45714656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38931522" y3="-3.62707717" z3="4.43982141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27628331" y3="-3.95998491" z3="2.50304871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03912041" y3="-3.08541267" z3="2.56380917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09563694" y3="-2.9184416" z3="4.99546402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32693551" y3="-3.79909301" z3="4.97523507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24312178" y3="-3.26092978" z3="6.2365784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41451223" y3="-3.89256639" z3="-0.62424163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17343981" y3="-3.38978117" z3="-1.0779119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52092213" y3="0.24468087" z3="-4.71221494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08118054" y3="-1.72408752" z3="0.02193492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90682008" y3="-0.97304479" z3="1.1834983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8452205" y3="-0.32236274" z3="1.51714135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37302597" y3="0.55559894" z3="1.22112464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4513375" y3="1.4541111" z3="-0.40575059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98301896" y3="-0.69611392" z3="1.40073626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36583065" y3="1.74818533" z3="2.66582446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88213248" y3="-0.96347113" z3="2.08106734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65510415" y3="-0.34790871" z3="3.33913302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20920404" y3="0.76389723" z3="-1.23197065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3209565" y3="2.24626818" z3="-0.40075458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43232686" y3="1.93483797" z3="-0.56830139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0127606" y3="-1.06075409" z3="2.44095483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95444472" y3="-0.23040278" z3="1.16243807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86088716" y3="-1.53844691" z3="0.70058404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4223424" y3="1.20868836" z3="3.6278958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56864305" y3="2.33830113" z3="2.66575373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20982418" y3="2.45899398" z3="2.61458071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.792255" y3="-0.80185376" z3="3.85229918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56976822" y3="-0.5233368" z3="3.92073893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48669599" y3="0.73459099" z3="3.21770256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84184019" y3="-0.7082422" z3="0.98977212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41284215" y3="-2.03411251" z3="0.84938332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76005933" y3="-2.68056115" z3="1.89152953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55368724" y3="-1.98847556" z3="3.08090469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03608363" y3="-0.69795306" z3="3.27828981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68803545" y3="-0.06470208" z3="2.22481574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51403436" y3="-2.53023437" z3="-0.11828016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36043438" y3="-3.6879593" z3="1.76595135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69264851" y3="-2.58826232" z3="4.10522087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85575809" y3="-0.18922922" z3="4.22533492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03282253" y3="0.96617448" z3="2.34133887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79540298" y3="0.46494814" z3="-4.28523422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77542125" y3="-0.5030745" z3="-4.45967989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42874414" y3="-1.69496504" z3="-5.08541112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14355005" y3="-1.92550959" z3="-5.56678541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82970013" y3="-0.95437428" z3="-5.36872851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03905211" y3="1.38852053" z3="-3.75360852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79324754" y3="-0.35719149" z3="-4.09682737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44031238" y3="-2.74493706" z3="-5.2226433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08561652" y3="-2.86587208" z3="-6.06808642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85090294" y3="-1.13984631" z3="-5.70619639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37152983" y3="-1.89759007" z3="5.0530323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31010463" y3="-3.72635208" z3="3.93328167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22228291" y3="-3.64152709" z3="-6.00894804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43674962" y3="-2.66573641" z3="-4.5320095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07224962" y3="1.16322955" z3="-1.49057979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11188527" y3="1.55175408" z3="-2.46964404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44093891" y3="1.49197221" z3="-1.68777152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85140182" y3="2.15714871" z3="-2.81674187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16689234" y3="1.19423815" z3="-0.92478316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90813336" y3="2.40043107" z3="-2.96005617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57271389" y3="2.2212314" z3="-3.63728038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9044196" y3="2.51546186" z3="-3.80593759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85195596" y3="2.49343412" z3="-4.41181544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23635439" y3="3.025916" z3="-4.7151355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40398012" y3="3.15174892" z3="-3.33274075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28952413" y3="3.564116" z3="-4.12120155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2110041" y3="4.16299213" z3="-2.73825245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96097894" y3="5.49564352" z3="-2.96285999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03896619" y3="3.87418478" z3="-2.08891785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59734815" y3="6.2514159" z3="-2.49342001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06505901" y3="4.9502251" z3="-4.34720901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88532656" y3="5.89902386" z3="-3.78909903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21437257" y3="5.24766729" z3="-4.96817379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70170535" y3="6.96213043" z3="-3.96718375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47879814" y3="-2.20285814" z3="-0.29780727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44834319" y3="-2.99486434" z3="-1.0653531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00745944" y3="-2.58600845" z3="0.58996819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09390661" y3="-1.38321967" z3="-0.71517478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17650436" y3="-1.42658219" z3="-1.14728697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31139033" y3="-0.38541214" z3="-1.49250115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10023715" y3="-1.55406637" z3="-0.94245288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41877829" y3="-2.07799849" z3="-2.00040316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3406,.0492,-.193;7.3868,.167,.4167;6.6476,.4416,-.342;4.7289,1.2352,-2.2623;4.3888,.4333,-1.1851;2.729,.8459,-3.6623;3.6343,1.7479,-3.1351;1.383,2.5907,-4.6172;1.5615,1.2504,-4.3749;.5042,2.9266,-5.1763;2.9248,-.4845,-3.4421;3.0987,.0441,-1.0023;2.4006,-1.0983,-2.0023;.9293,-.967,-1.8284;3.102,-2.4234,-1.8493;-.1421,-3.6161,.6731;-.0142,-5.2574,-4.7428;-.2427,-4.9999,-3.705;-.8406,-4.3098,-1.0854;.7817,-4.5898,-2.8535;-1.5585,-5.0912,-3.2465;-1.8583,-4.7407,-1.9324;.4948,-4.2595,-1.5275;1.8139,-4.507,-3.2007;-2.3572,-5.4059,-3.9216;-2.8948,-4.7801,-1.5888;-1.0304,-3.8611,.2352;-2.1708,-3.6491,.8805;-3.0582,-4.113,.4473;-2.1656,-3.5128,2.3473;-2.2232,-3.3255,5.1451;-3.3615,-3.7184,3.051;-.9985,-3.2195,3.0686;-1.0247,-3.1264,4.4571;-3.3893,-3.6271,4.4398;-4.2763,-3.96,2.503;-.0391,-3.0854,2.5638;-.0956,-2.9184,4.9955;-4.3269,-3.7991,4.9752;-2.2431,-3.2609,6.2366;1.4145,-3.8926,-.6242;2.1734,-3.3898,-1.0779;.5209,.2447,-4.7122;-3.0812,-1.7241,.0219;-2.9068,-.973,1.1835;-1.8452,-.3224,1.5171;-.373,.5556,1.2211;-.4513,1.4541,-.4058;.983,-.6961,1.4007;-.3658,1.7482,2.6658;-3.8821,-.9635,2.0811;-3.6551,-.3479,3.3391;-.2092,.7639,-1.232;.321,2.2463,-.4008;-1.4323,1.9348,-.5683;1.0128,-1.0608,2.441;1.9544,-.2304,1.1624;.8609,-1.5384,.7006;-.4223,1.2087,3.6279;.5686,2.3383,2.6658;-1.2098,2.459,2.6146;-2.7923,-.8019,3.8523;-4.5698,-.5233,3.9207;-3.4867,.7346,3.2177;4.8418,-.7082,.9898;4.4128,-2.0341,.8494;3.7601,-2.6806,1.8915;3.5537,-1.9885,3.0809;4.0361,-.698,3.2783;4.688,-.0647,2.2248;4.514,-2.5302,-.1183;3.3604,-3.688,1.766;2.6926,-2.5883,4.1052;3.8558,-.1892,4.2253;5.0328,.9662,2.3413;-.7954,.4649,-4.2852;-1.7754,-.5031,-4.4597;-1.4287,-1.695,-5.0854;-.1436,-1.9255,-5.5668;.8297,-.9544,-5.3687;-1.0391,1.3885,-3.7536;-2.7932,-.3572,-4.0968;-2.4403,-2.7449,-5.2226;.0856,-2.8659,-6.0681;1.8509,-1.1398,-5.7062;2.3715,-1.8976,5.053;2.3101,-3.7264,3.9333;-2.2223,-3.6415,-6.0089;-3.4367,-2.6657,-4.532;7.0722,1.1632,-1.4906;6.1119,1.5518,-2.4696;8.4409,1.492,-1.6878;8.8514,2.1571,-2.8167;9.1669,1.1942,-.9248;9.9081,2.4004,-2.9601;6.5727,2.2212,-3.6373;7.9044,2.5155,-3.8059;5.852,2.4934,-4.4118;8.2364,3.0259,-4.7151;3.404,3.1517,-3.3327;2.2895,3.5641,-4.1212;4.211,4.163,-2.7383;3.961,5.4956,-2.9629;5.039,3.8742,-2.0889;4.5973,6.2514,-2.4934;2.0651,4.9502,-4.3472;2.8853,5.899,-3.7891;1.2144,5.2477,-4.9682;2.7017,6.9621,-3.9672;-4.4788,-2.2029,-.2978;-4.4483,-2.9949,-1.0654;-5.0075,-2.586,.59;-5.0939,-1.3832,-.7152;-2.1765,-1.4266,-1.1473;-2.3114,-.3854,-1.4925;-1.1002,-1.5541,-.9425;-2.4188,-2.078,-2.0004;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421195647</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002052608001 0.000264696094 0.016385561608 0.005338636268</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689525 -0.000289323 0.000034111 0.000069974 0.000252931 0.000316692 0.000357861 0.000431008 0.000602379 0.000824298 0.000938005 0.001041611 0.001213415 0.001323221 0.001371868 0.001410907 0.001558940 0.001783700 0.001873754 0.001930617 0.002154986 0.002340044 0.002578340 0.002664546 0.002685656 0.003021977 0.003123338 0.003428514 0.003518769 0.003910722 0.004454147 0.004725671 0.004750481 0.005084755 0.005993475 0.006115183 0.006239565 0.006648420 0.006953547 0.007742649 0.008120425 0.008233874 0.009325721 0.009507834 0.010070118 0.010571639 0.010715124 0.011134991 0.011862998 0.012260619 0.012969476 0.013114899 0.014124673 0.014586581 0.015358841 0.015521541 0.015875870 0.016373587 0.016958175 0.017491048 0.018150951 0.018557527 0.019485886 0.019648518 0.020083122 0.020823286 0.021224221 0.021425694 0.022595778 0.023164712 0.025011605 0.026334066 0.026794218 0.027662724 0.027821445 0.029525500 0.030321679 0.031636392 0.033295000 0.033643564 0.034088269 0.035791625 0.037038491 0.037721417 0.039585036 0.040062801 0.040891806 0.042367122 0.044069643 0.045002193 0.045457287 0.047127169 0.047952959 0.049249381 0.050452879 0.051012308 0.051233748 0.051562434 0.052484477 0.052691894 0.052926484 0.053113384 0.054734052 0.054945645 0.056020056 0.056274863 0.056543267 0.056713393 0.057222581 0.059120512 0.060532883 0.060958370 0.061712701 0.062362257 0.063320934 0.064523325 0.065360930 0.066044789 0.066550660 0.068377907 0.069089845 0.070310926 0.072744911 0.074502484 0.074792750 0.076455805 0.078470700 0.084068988 0.086574008 0.087124872 0.087615732 0.089109757 0.090572918 0.091302735 0.093966407 0.094738448 0.095799960 0.096425538 0.097850654 0.098828340 0.099306749 0.100195002 0.100877225 0.102479119 0.103211636 0.103591049 0.104356906 0.104570927 0.106345221 0.106983712 0.108150116 0.109790258 0.110980835 0.112362213 0.113073094 0.115045961 0.116201349 0.116825205 0.118706078 0.120782598 0.122290957 0.123164456 0.124597618 0.126135905 0.126252308 0.126642262 0.127209707 0.132039318 0.135084179 0.135811267 0.142800432 0.143764091 0.147077025 0.147611383 0.149734088 0.152863034 0.154671634 0.156238485 0.156706453 0.161549908 0.161901019 0.173763174 0.174257157 0.181098446 0.184849738 0.186396960 0.189614619 0.190398188 0.194144406 0.195317907 0.198655124 0.200286643 0.205253535 0.206969416 0.207365975 0.210231775 0.216153093 0.216709787 0.217939288 0.219165998 0.220805229 0.225288822 0.226694974 0.232216896 0.235118355 0.235700591 0.235994158 0.244684291 0.256065717 0.257264279 0.263870801 0.269977481 0.280532756 0.283327877 0.286332810 0.291882591 0.296829296 0.304395711 0.305794143 0.307326179 0.314465389 0.316752686 0.317395982 0.322228306 0.330155135 0.332869509 0.351810238 0.352401440 0.355148579 0.355882089 0.360076135 0.363000782 0.364250745 0.384435591 0.386056676 0.392182307 0.410719983 0.425895432 0.430966210 0.462402572 0.469045884 0.478570934 0.483915931 0.484549167 0.488136476 0.491477883 0.509625098 0.515652813 0.535488164 0.569580121 0.575245974 0.592567890 0.594067859 0.607279976 0.608392932 0.644689780 0.647665212 0.649706450 0.674346281 0.678393612 0.686028338 0.692005166 0.693623736 0.700071700 0.704475215 0.718173518 0.742260338 0.751343689 0.759435653 0.769722513 0.773205141 0.779571440 0.810998598 0.815711253 0.819925515 0.822818878 0.823569753 0.831709724 0.834967517 0.837898091 0.842457344 0.845852970 0.847551324 0.849850420 0.859267398 0.865931208 0.867229884 0.874219281 0.885926246 0.886285352 0.889708595 0.899960804 0.901084542 0.904134993 0.923795064 0.927968340 0.936474776 0.937622475 0.966198732 0.976278046 0.986448077 1.001694234 1.020172553 1.028374955 1.042065631 1.050982970 1.057668387 1.068859752 1.086863236 1.088755981 1.104719409 1.107993246 1.112510450 1.125736959 1.135982692 1.140128567 1.144673287 1.176346055 1.179042263 1.181598657 1.186999054 1.191581621 1.196818935 1.224702465 1.228365571 1.274994905 1.302705329 1.321296908 1.328378923 1.333390643 1.336491211 1.338346300 1.343133138 1.343512621 1.345086011 1.359293673 1.379087029 1.383002656 1.385510687 1.415866583 1.420438424 1.436422338 1.551494964 1.683259327 1.776397311</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">258</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33890325" y3="0.05283098" z3="-0.19504272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3850636" y3="0.16348761" z3="0.4142989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64643058" y3="0.4398203" z3="-0.34443401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73032979" y3="1.24058454" z3="-2.26416647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38819871" y3="0.4391924" z3="-1.18711232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73228086" y3="0.85092868" z3="-3.66657336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63700868" y3="1.75344029" z3="-3.13829636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38594735" y3="2.59690459" z3="-4.62069369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56527597" y3="1.25507934" z3="-4.38044642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50723602" y3="2.93247208" z3="-5.18028864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92745915" y3="-0.47942906" z3="-3.44525091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09730874" y3="0.050854" z3="-1.00531027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3997266" y3="-1.09170825" z3="-2.00593773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92816582" y3="-0.95873846" z3="-1.83506656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.099624" y3="-2.41727763" z3="-1.85032162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1435697" y3="-3.62012773" z3="0.68096433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01741787" y3="-5.246439" z3="-4.73964637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24514318" y3="-4.99321502" z3="-3.7007332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84119595" y3="-4.31304588" z3="-1.07841812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77883541" y3="-4.57965798" z3="-2.85044315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55925697" y3="-5.09331904" z3="-3.23987697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85806087" y3="-4.74823406" z3="-1.9241945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49288438" y3="-4.25405647" z3="-1.5230754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81069442" y3="-4.49176627" z3="-3.19971429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35754607" y3="-5.41054738" z3="-3.91433416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89339613" y3="-4.79499035" z3="-1.57821256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03112553" y3="-3.86700854" z3="0.24318318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17200214" y3="-3.65343889" z3="0.88718228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05908532" y3="-4.11744035" z3="0.45395382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16763213" y3="-3.51591762" z3="2.35405193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22695987" y3="-3.32425456" z3="5.15151468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36399743" y3="-3.71954373" z3="3.05729746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00078023" y3="-3.22298432" z3="3.07573607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02762035" y3="-3.12783187" z3="4.46409707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3927562" y3="-3.62588516" z3="4.44594035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2789391" y3="-3.96068094" z3="2.5091165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04096915" y3="-3.09087532" z3="2.57154509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09835428" y3="-2.92023908" z3="5.00243382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33125771" y3="-3.79541638" z3="4.98102919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24768282" y3="-3.25764274" z3="6.24287234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41242756" y3="-3.88352092" z3="-0.62086481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17080235" y3="-3.38071854" z3="-1.0758913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52472538" y3="0.24971218" z3="-4.71597667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07998297" y3="-1.72955828" z3="0.02520428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90963056" y3="-0.97646887" z3="1.18621666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.851347" y3="-0.32175307" z3="1.52164487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37478037" y3="0.54912073" z3="1.2214815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45720735" y3="1.45351546" z3="-0.40201863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97722769" y3="-0.70788703" z3="1.39186947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35653228" y3="1.73711854" z3="2.66984499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88700078" y3="-0.96811409" z3="2.08123666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66423453" y3="-0.35026619" z3="3.33885557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21622699" y3="0.76681389" z3="-1.23168898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31351371" y3="2.24664801" z3="-0.39530912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43916104" y3="1.93367303" z3="-0.56041311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01058048" y3="-1.07331826" z3="2.43158512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94928272" y3="-0.24500548" z3="1.14984767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84973025" y3="-1.54931019" z3="0.69163925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41289432" y3="1.19506958" z3="3.630553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58133829" y3="2.32191557" z3="2.66819254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19672838" y3="2.45253199" z3="2.62354128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80241238" y3="-0.80277372" z3="3.85514249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58050339" y3="-0.5254454" z3="3.9182661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49642722" y3="0.73238142" z3="3.21639418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83732001" y3="-0.70478722" z3="0.98635358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41268658" y3="-2.03213765" z3="0.84615571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75989266" y3="-2.67953484" z3="1.88784256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54943581" y3="-1.98694871" z3="3.07682179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02610827" y3="-0.69433676" z3="3.27331161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67818608" y3="-0.06018127" z3="2.22052169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5213655" y3="-2.53005996" z3="-0.11793946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36541293" y3="-3.68852851" z3="1.76357708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6878558" y3="-2.58810675" z3="4.09986657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84314829" y3="-0.18543194" z3="4.22076522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02073562" y3="0.97193998" z3="2.33772221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79088582" y3="0.46901441" z3="-4.28635399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77012624" y3="-0.50044104" z3="-4.46021123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42317577" y3="-1.69229117" z3="-5.08526881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13854814" y3="-1.92146279" z3="-5.5679705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83358896" y3="-0.94922512" z3="-5.37336571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03464835" y3="1.39241679" z3="-3.75488152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78755589" y3="-0.35558441" z3="-4.09609226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43381347" y3="-2.74347877" z3="-5.22047077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0911285" y3="-2.86183272" z3="-6.06956508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85410812" y3="-1.13411906" z3="-5.71215924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36228738" y3="-1.8971977" z3="5.04497047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30598072" y3="-3.72739864" z3="3.92631933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21425464" y3="-3.64292943" z3="-6.00316972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43105103" y3="-2.66198011" z3="-4.53136645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07299246" y3="1.16149539" z3="-1.49263128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11393311" y3="1.55385147" z3="-2.47127626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44288364" y3="1.48758791" z3="-1.68981328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85522379" y3="2.15242471" z3="-2.81875748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16803596" y3="1.18738921" z3="-0.92710771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91252789" y3="2.39193553" z3="-2.96257156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57649451" y3="2.22277064" z3="-3.63890294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9089694" y3="2.5130019" z3="-3.80791035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85632909" y3="2.49707096" z3="-4.41323338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24210024" y3="3.01970486" z3="-4.71762084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4075395" y3="3.15710782" z3="-3.3370496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29285455" y3="3.56985474" z3="-4.1251669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21604378" y3="4.16757055" z3="-2.74411655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96601487" y3="5.50083582" z3="-2.96831373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04410937" y3="3.87854305" z3="-2.09501036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60331964" y3="6.25617811" z3="-2.49996003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06913773" y3="4.95586836" z3="-4.35161804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89002377" y3="5.90451862" z3="-3.79400543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21817276" y3="5.25391773" z3="-4.97195476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70652357" y3="6.96793402" z3="-3.97194803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47662934" y3="-2.20951123" z3="-0.29771093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44331307" y3="-3.00225949" z3="-1.06419925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00757685" y3="-2.59197058" z3="0.58874186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09105479" y3="-1.39073175" z3="-0.71793142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17387699" y3="-1.43187944" z3="-1.14305246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30912533" y3="-0.39037563" z3="-1.48913952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09801164" y3="-1.55741646" z3="-0.93627144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41334337" y3="-2.08436994" z3="-1.99590085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3389,.0528,-.195;7.3851,.1635,.4143;6.6464,.4398,-.3444;4.7303,1.2406,-2.2642;4.3882,.4392,-1.1871;2.7323,.8509,-3.6666;3.637,1.7534,-3.1383;1.3859,2.5969,-4.6207;1.5653,1.2551,-4.3804;.5072,2.9325,-5.1803;2.9275,-.4794,-3.4453;3.0973,.0509,-1.0053;2.3997,-1.0917,-2.0059;.9282,-.9587,-1.8351;3.0996,-2.4173,-1.8503;-.1436,-3.6201,.681;-.0174,-5.2464,-4.7396;-.2451,-4.9932,-3.7007;-.8412,-4.313,-1.0784;.7788,-4.5797,-2.8504;-1.5593,-5.0933,-3.2399;-1.8581,-4.7482,-1.9242;.4929,-4.2541,-1.5231;1.8107,-4.4918,-3.1997;-2.3575,-5.4105,-3.9143;-2.8934,-4.795,-1.5782;-1.0311,-3.867,.2432;-2.172,-3.6534,.8872;-3.0591,-4.1174,.454;-2.1676,-3.5159,2.3541;-2.227,-3.3243,5.1515;-3.364,-3.7195,3.0573;-1.0008,-3.223,3.0757;-1.0276,-3.1278,4.4641;-3.3928,-3.6259,4.4459;-4.2789,-3.9607,2.5091;-.041,-3.0909,2.5715;-.0984,-2.9202,5.0024;-4.3313,-3.7954,4.981;-2.2477,-3.2576,6.2429;1.4124,-3.8835,-.6209;2.1708,-3.3807,-1.0759;.5247,.2497,-4.716;-3.08,-1.7296,.0252;-2.9096,-.9765,1.1862;-1.8513,-.3218,1.5216;-.3748,.5491,1.2215;-.4572,1.4535,-.402;.9772,-.7079,1.3919;-.3565,1.7371,2.6698;-3.887,-.9681,2.0812;-3.6642,-.3503,3.3389;-.2162,.7668,-1.2317;.3135,2.2466,-.3953;-1.4392,1.9337,-.5604;1.0106,-1.0733,2.4316;1.9493,-.245,1.1498;.8497,-1.5493,.6916;-.4129,1.1951,3.6306;.5813,2.3219,2.6682;-1.1967,2.4525,2.6235;-2.8024,-.8028,3.8551;-4.5805,-.5254,3.9183;-3.4964,.7324,3.2164;4.8373,-.7048,.9864;4.4127,-2.0321,.8462;3.7599,-2.6795,1.8878;3.5494,-1.9869,3.0768;4.0261,-.6943,3.2733;4.6782,-.0602,2.2205;4.5214,-2.5301,-.1179;3.3654,-3.6885,1.7636;2.6879,-2.5881,4.0999;3.8431,-.1854,4.2208;5.0207,.9719,2.3377;-.7909,.469,-4.2864;-1.7701,-.5004,-4.4602;-1.4232,-1.6923,-5.0853;-.1385,-1.9215,-5.568;.8336,-.9492,-5.3734;-1.0346,1.3924,-3.7549;-2.7876,-.3556,-4.0961;-2.4338,-2.7435,-5.2205;.0911,-2.8618,-6.0696;1.8541,-1.1341,-5.7122;2.3623,-1.8972,5.045;2.306,-3.7274,3.9263;-2.2143,-3.6429,-6.0032;-3.4311,-2.662,-4.5314;7.073,1.1615,-1.4926;6.1139,1.5539,-2.4713;8.4429,1.4876,-1.6898;8.8552,2.1524,-2.8188;9.168,1.1874,-.9271;9.9125,2.3919,-2.9626;6.5765,2.2228,-3.6389;7.909,2.513,-3.8079;5.8563,2.4971,-4.4132;8.2421,3.0197,-4.7176;3.4075,3.1571,-3.337;2.2929,3.5699,-4.1252;4.216,4.1676,-2.7441;3.966,5.5008,-2.9683;5.0441,3.8785,-2.095;4.6033,6.2562,-2.5;2.0691,4.9559,-4.3516;2.89,5.9045,-3.794;1.2182,5.2539,-4.972;2.7065,6.9679,-3.9719;-4.4766,-2.2095,-.2977;-4.4433,-3.0023,-1.0642;-5.0076,-2.592,.5887;-5.0911,-1.3907,-.7179;-2.1739,-1.4319,-1.1431;-2.3091,-.3904,-1.4891;-1.098,-1.5574,-.9363;-2.4133,-2.0844,-1.9959;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421150147</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002359606928 0.000259663812 0.019076884677 0.005313966779</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689568 -0.000191645 0.000043082 0.000086814 0.000262823 0.000309882 0.000362209 0.000430858 0.000603959 0.000825739 0.000938761 0.001043071 0.001219202 0.001324619 0.001371562 0.001411306 0.001558830 0.001783549 0.001874165 0.001929650 0.002155666 0.002342565 0.002579115 0.002664716 0.002684599 0.003023686 0.003123732 0.003430291 0.003520247 0.003912698 0.004455460 0.004727544 0.004750057 0.005084951 0.005997819 0.006115117 0.006240944 0.006649157 0.006953819 0.007743693 0.008120494 0.008234747 0.009325634 0.009510357 0.010071262 0.010576833 0.010717338 0.011134861 0.011871193 0.012260623 0.012970150 0.013115377 0.014136296 0.014590001 0.015359059 0.015521951 0.015876492 0.016379308 0.016957418 0.017491216 0.018151531 0.018560362 0.019487216 0.019648128 0.020090756 0.020823327 0.021224559 0.021424959 0.022597151 0.023167033 0.025011843 0.026343193 0.026794539 0.027662926 0.027826439 0.029525802 0.030321754 0.031636451 0.033296066 0.033645760 0.034094446 0.035792834 0.037043612 0.037727976 0.039585659 0.040063624 0.040895521 0.042378534 0.044068468 0.045002354 0.045458081 0.047127270 0.047957214 0.049252035 0.050454025 0.051013598 0.051233730 0.051562506 0.052484674 0.052692422 0.052926495 0.053113889 0.054734166 0.054945823 0.056020862 0.056275018 0.056544410 0.056713459 0.057222650 0.059120642 0.060539051 0.060964503 0.061713143 0.062365559 0.063321603 0.064523345 0.065361142 0.066044761 0.066550691 0.068379037 0.069090186 0.070313225 0.072744910 0.074502499 0.074793408 0.076469199 0.078477259 0.084072450 0.086593196 0.087127440 0.087617142 0.089141046 0.090573127 0.091330039 0.093976405 0.094744813 0.095799920 0.096426226 0.097850793 0.098830208 0.099314488 0.100194968 0.100883735 0.102479089 0.103211630 0.103592252 0.104356977 0.104571796 0.106346341 0.106983922 0.108151038 0.109791450 0.110988540 0.112368957 0.113105024 0.115047036 0.116202825 0.116825242 0.118706094 0.120786186 0.122294450 0.123164690 0.124605032 0.126155686 0.126258888 0.126642307 0.127214055 0.132039935 0.135084955 0.135811355 0.142803035 0.143767358 0.147077064 0.147611512 0.149737041 0.152863066 0.154671688 0.156240685 0.156707937 0.161550873 0.161901094 0.173766899 0.174260054 0.181128828 0.184849756 0.186397568 0.189614762 0.190398280 0.194146168 0.195339451 0.198657707 0.200288550 0.205252931 0.206975499 0.207370087 0.210231830 0.216217388 0.216719240 0.217946058 0.219168657 0.220811091 0.225288808 0.226695449 0.232225534 0.235118362 0.235700862 0.235994387 0.244686276 0.256068414 0.257264316 0.263881736 0.269977554 0.280565776 0.283327804 0.286332825 0.291888446 0.296847845 0.304395869 0.305794234 0.307326323 0.314465520 0.316752779 0.317396853 0.322228431 0.330162588 0.332869636 0.351815397 0.352447660 0.355153368 0.355892319 0.360076147 0.363013140 0.364254064 0.384435661 0.386056760 0.392183383 0.410721702 0.425897596 0.430966278 0.462405452 0.469076698 0.478584915 0.483969445 0.484551211 0.488159085 0.491478014 0.509626057 0.515654400 0.535495975 0.569580251 0.575254428 0.592575410 0.594068301 0.607287863 0.608394118 0.644692315 0.647667929 0.649706899 0.674346714 0.678401889 0.686033812 0.692005255 0.693625130 0.700073339 0.704492785 0.718178079 0.742260449 0.751348133 0.759435679 0.769728226 0.773206218 0.779571412 0.810998831 0.815714153 0.819926537 0.822818870 0.823570309 0.831712067 0.834969637 0.837907634 0.842460347 0.845853466 0.847551357 0.849850516 0.859270598 0.865934023 0.867243882 0.874220108 0.885941230 0.886286818 0.889708751 0.899961173 0.901085688 0.904135001 0.923798274 0.927969545 0.936475040 0.937644525 0.966199035 0.976310042 0.986503886 1.001701861 1.020183384 1.028374949 1.042065929 1.050988207 1.057669098 1.068859837 1.086872200 1.088761196 1.104720366 1.108008235 1.112512041 1.125836294 1.135982852 1.140149093 1.144673953 1.176352819 1.179043340 1.181645201 1.186999153 1.191585621 1.196957415 1.224703185 1.228365860 1.274996923 1.302705480 1.321335058 1.328379758 1.333391612 1.336491746 1.338383727 1.343188267 1.343517077 1.345085929 1.359294904 1.379147466 1.383007272 1.385529831 1.415868346 1.420439020 1.436439950 1.551494970 1.683598786 1.776400809</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">259</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33608118" y3="0.05808747" z3="-0.19487768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38206645" y3="0.1674118" z3="0.41634947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64459959" y3="0.444625" z3="-0.34310976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73090591" y3="1.24385323" z3="-2.26605848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38664527" y3="0.44491534" z3="-1.18801738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73417364" y3="0.85493196" z3="-3.66958921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63952478" y3="1.75671708" z3="-3.14257572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39153145" y3="2.59958704" z3="-4.62992256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56844352" y3="1.25948222" z3="-4.38504211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51366728" y3="2.93529656" z3="-5.19069402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92742605" y3="-0.47516532" z3="-3.44568888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09519227" y3="0.05931978" z3="-1.00680818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39794871" y3="-1.08466747" z3="-2.00604521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92625182" y3="-0.95098241" z3="-1.83749841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09734261" y3="-2.41014081" z3="-1.84723782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14442219" y3="-3.62364642" z3="0.68636779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01966399" y3="-5.23901599" z3="-4.73871378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24671939" y3="-4.98814185" z3="-3.69900103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84178186" y3="-4.31349912" z3="-1.07473838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77688344" y3="-4.57251145" z3="-2.84939829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56000449" y3="-5.09291401" z3="-3.23651115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85826361" y3="-4.75070706" z3="-1.91986671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49160032" y3="-4.24985558" z3="-1.52103965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80716298" y3="-4.47901052" z3="-3.19979303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35824338" y3="-5.41160234" z3="-3.91042143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89294119" y3="-4.80158462" z3="-1.572381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03203779" y3="-3.86951302" z3="0.247582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17329503" y3="-3.65629596" z3="0.89113299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06024701" y3="-4.11998389" z3="0.45717435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1700719" y3="-3.51975717" z3="2.35806571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23198696" y3="-3.3284566" z3="5.1554423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3675216" y3="-3.72188482" z3="3.0601225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00340646" y3="-3.22903471" z3="3.08094367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03166906" y3="-3.13371375" z3="4.46921663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39750522" y3="-3.62850663" z3="4.44872571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28202079" y3="-3.96194373" z3="2.51106482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04249442" y3="-3.09929606" z3="2.57775886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10282495" y3="-2.92699314" z3="5.0082271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33650597" y3="-3.79735882" z3="4.98286682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.253819" y3="-3.26169163" z3="6.24675009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41087147" y3="-3.87769512" z3="-0.61940496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16876876" y3="-3.37387468" z3="-1.07423599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52779524" y3="0.25329655" z3="-4.72102069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08167101" y3="-1.73314958" z3="0.02924337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91172084" y3="-0.97948978" z3="1.1901543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85405958" y3="-0.32337078" z3="1.52554831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37490448" y3="0.54213695" z3="1.22380475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46086495" y3="1.45301611" z3="-0.39584935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97342998" y3="-0.71982634" z3="1.3854394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34487663" y3="1.72316443" z3="2.67768284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88912789" y3="-0.97164214" z3="2.08540191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66644623" y3="-0.35360033" z3="3.34313431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22393138" y3="0.76906909" z3="-1.22871018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31285272" y3="2.24364234" z3="-0.38910787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4418096" y3="1.93641752" z3="-0.5491859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00758157" y3="-1.09049969" z3="2.42346189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9453033" y3="-0.25653924" z3="1.14502103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84405407" y3="-1.55716567" z3="0.68092875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39896686" y3="1.17621122" z3="3.63556757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59629888" y3="2.30283869" z3="2.67481606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18154339" y3="2.44344834" z3="2.63937885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80339376" y3="-0.80430626" z3="3.85867391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58185529" y3="-0.53065144" z3="3.92330679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50065957" y3="0.72905118" z3="3.22033398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83413913" y3="-0.69894356" z3="0.9869493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41566705" y3="-2.02826938" z3="0.84812231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76271923" y3="-2.6767519" z3="1.88903208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54552016" y3="-1.98291229" z3="3.07549518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01623217" y3="-0.68780106" z3="3.27119019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66842135" y3="-0.0526436" z3="2.21908528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52512829" y3="-2.52607492" z3="-0.11771733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37100609" y3="-3.68738235" z3="1.76433558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68432448" y3="-2.58605137" z3="4.09773226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82706242" y3="-0.17771704" z3="4.21597656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0046774" y3="0.98121848" z3="2.33421078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78756229" y3="0.4723724" z3="-4.29088998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76669176" y3="-0.49721631" z3="-4.4622312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42012323" y3="-1.68922541" z3="-5.08770209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13599117" y3="-1.91843972" z3="-5.57252331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83642123" y3="-0.94583591" z3="-5.37794277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03074026" y3="1.39597924" z3="-3.75905168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78371923" y3="-0.35255272" z3="-4.09656641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43075232" y3="-2.74074026" z3="-5.22163465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09300354" y3="-2.85890259" z3="-6.0736285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8569829" y3="-1.13035063" z3="-5.71785623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35516368" y3="-1.89533778" z3="5.04272656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30946775" y3="-3.7269091" z3="3.92678488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21038534" y3="-3.64181986" z3="-6.00244491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42897937" y3="-2.65818136" z3="-4.53387768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07310928" y3="1.16378435" z3="-1.49181268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11522237" y3="1.55533046" z3="-2.47205757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4434789" y3="1.48649214" z3="-1.68838031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85780017" y3="2.14834267" z3="-2.81803215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16746875" y3="1.18616053" z3="-0.92459909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91555985" y3="2.38545037" z3="-2.96134054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57985703" y3="2.22169412" z3="-3.64010782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91307087" y3="2.50969521" z3="-3.80829257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86085756" y3="2.49632804" z3="-4.41541345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2478808" y3="3.01644346" z3="-4.71814819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41150317" y3="3.16057482" z3="-3.34385017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29868444" y3="3.57275027" z3="-4.13477953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21933224" y3="4.17215784" z3="-2.75064198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97184364" y3="5.50458389" z3="-2.97887279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04630819" y3="3.88346722" z3="-2.09995768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60907005" y3="6.26044375" z3="-2.51080239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07662396" y3="4.9586388" z3="-4.36416117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89760983" y3="5.90764738" z3="-3.80710657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2269903" y3="5.25613968" z3="-4.98655995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7157991" y3="6.97065261" z3="-3.98782907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47839668" y3="-2.21401578" z3="-0.29282394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44525371" y3="-3.00680371" z3="-1.05943091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0083401" y3="-2.59652783" z3="0.59443329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09389122" y3="-1.39578237" z3="-0.71264282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17686311" y3="-1.43450254" z3="-1.13997081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31397331" y3="-0.39383356" z3="-1.48638854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10046121" y3="-1.55939258" z3="-0.93477378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41634521" y3="-2.08759767" z3="-1.99241431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3361,.0581,-.1949;7.3821,.1674,.4163;6.6446,.4446,-.3431;4.7309,1.2439,-2.2661;4.3866,.4449,-1.188;2.7342,.8549,-3.6696;3.6395,1.7567,-3.1426;1.3915,2.5996,-4.6299;1.5684,1.2595,-4.385;.5137,2.9353,-5.1907;2.9274,-.4752,-3.4457;3.0952,.0593,-1.0068;2.3979,-1.0847,-2.006;.9263,-.951,-1.8375;3.0973,-2.4101,-1.8472;-.1444,-3.6236,.6864;-.0197,-5.239,-4.7387;-.2467,-4.9881,-3.699;-.8418,-4.3135,-1.0747;.7769,-4.5725,-2.8494;-1.56,-5.0929,-3.2365;-1.8583,-4.7507,-1.9199;.4916,-4.2499,-1.521;1.8072,-4.479,-3.1998;-2.3582,-5.4116,-3.9104;-2.8929,-4.8016,-1.5724;-1.032,-3.8695,.2476;-2.1733,-3.6563,.8911;-3.0602,-4.12,.4572;-2.1701,-3.5198,2.3581;-2.232,-3.3285,5.1554;-3.3675,-3.7219,3.0601;-1.0034,-3.229,3.0809;-1.0317,-3.1337,4.4692;-3.3975,-3.6285,4.4487;-4.282,-3.9619,2.5111;-.0425,-3.0993,2.5778;-.1028,-2.927,5.0082;-4.3365,-3.7974,4.9829;-2.2538,-3.2617,6.2468;1.4109,-3.8777,-.6194;2.1688,-3.3739,-1.0742;.5278,.2533,-4.721;-3.0817,-1.7331,.0292;-2.9117,-.9795,1.1902;-1.8541,-.3234,1.5255;-.3749,.5421,1.2238;-.4609,1.453,-.3958;.9734,-.7198,1.3854;-.3449,1.7232,2.6777;-3.8891,-.9716,2.0854;-3.6664,-.3536,3.3431;-.2239,.7691,-1.2287;.3129,2.2436,-.3891;-1.4418,1.9364,-.5492;1.0076,-1.0905,2.4235;1.9453,-.2565,1.145;.8441,-1.5572,.6809;-.399,1.1762,3.6356;.5963,2.3028,2.6748;-1.1815,2.4434,2.6394;-2.8034,-.8043,3.8587;-4.5819,-.5307,3.9233;-3.5007,.7291,3.2203;4.8341,-.6989,.9869;4.4157,-2.0283,.8481;3.7627,-2.6768,1.889;3.5455,-1.9829,3.0755;4.0162,-.6878,3.2712;4.6684,-.0526,2.2191;4.5251,-2.5261,-.1177;3.371,-3.6874,1.7643;2.6843,-2.5861,4.0977;3.8271,-.1777,4.216;5.0047,.9812,2.3342;-.7876,.4724,-4.2909;-1.7667,-.4972,-4.4622;-1.4201,-1.6892,-5.0877;-.136,-1.9184,-5.5725;.8364,-.9458,-5.3779;-1.0307,1.396,-3.7591;-2.7837,-.3526,-4.0966;-2.4308,-2.7407,-5.2216;.093,-2.8589,-6.0736;1.857,-1.1304,-5.7179;2.3552,-1.8953,5.0427;2.3095,-3.7269,3.9268;-2.2104,-3.6418,-6.0024;-3.429,-2.6582,-4.5339;7.0731,1.1638,-1.4918;6.1152,1.5553,-2.4721;8.4435,1.4865,-1.6884;8.8578,2.1483,-2.818;9.1675,1.1862,-.9246;9.9156,2.3855,-2.9613;6.5799,2.2217,-3.6401;7.9131,2.5097,-3.8083;5.8609,2.4963,-4.4154;8.2479,3.0164,-4.7181;3.4115,3.1606,-3.3439;2.2987,3.5728,-4.1348;4.2193,4.1722,-2.7506;3.9718,5.5046,-2.9789;5.0463,3.8835,-2.1;4.6091,6.2604,-2.5108;2.0766,4.9586,-4.3642;2.8976,5.9076,-3.8071;1.227,5.2561,-4.9866;2.7158,6.9707,-3.9878;-4.4784,-2.214,-.2928;-4.4453,-3.0068,-1.0594;-5.0083,-2.5965,.5944;-5.0939,-1.3958,-.7126;-2.1769,-1.4345,-1.14;-2.314,-.3938,-1.4864;-1.1005,-1.5594,-.9348;-2.4163,-2.0876,-1.9924;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417995888</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001848414529 0.000229276250 0.025799846617 0.005362353680</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689546 -0.000231889 0.000062409 0.000118979 0.000261904 0.000330002 0.000376003 0.000434920 0.000603454 0.000826468 0.000940512 0.001044401 0.001226988 0.001326819 0.001371454 0.001411989 0.001560263 0.001784146 0.001874670 0.001929331 0.002155516 0.002343495 0.002580044 0.002665346 0.002684280 0.003029144 0.003122643 0.003430145 0.003519370 0.003913278 0.004460957 0.004727334 0.004750185 0.005084861 0.006004097 0.006116260 0.006242623 0.006648922 0.006955362 0.007743708 0.008120486 0.008234780 0.009326275 0.009513806 0.010070785 0.010581036 0.010718533 0.011135148 0.011873916 0.012261996 0.012970460 0.013114918 0.014141981 0.014591769 0.015359511 0.015521936 0.015876774 0.016382808 0.016957578 0.017491583 0.018152606 0.018562622 0.019488382 0.019648194 0.020095769 0.020823484 0.021224898 0.021424500 0.022597995 0.023169448 0.025012321 0.026351398 0.026794588 0.027663183 0.027828376 0.029526402 0.030321798 0.031636674 0.033298593 0.033647724 0.034098732 0.035793575 0.037046420 0.037735794 0.039585690 0.040067532 0.040896239 0.042387026 0.044068016 0.045001636 0.045458252 0.047127280 0.047963560 0.049255524 0.050454052 0.051013588 0.051233715 0.051564014 0.052484906 0.052693570 0.052926549 0.053113985 0.054734129 0.054946504 0.056022862 0.056274988 0.056544570 0.056713438 0.057222785 0.059121379 0.060542607 0.060967791 0.061714404 0.062370514 0.063321495 0.064523368 0.065361906 0.066045003 0.066551549 0.068379510 0.069090839 0.070315900 0.072745220 0.074502804 0.074793547 0.076479901 0.078483563 0.084075125 0.086617605 0.087131240 0.087617346 0.089161847 0.090573151 0.091353781 0.093983325 0.094755854 0.095801110 0.096426630 0.097850860 0.098830665 0.099318656 0.100194972 0.100889964 0.102479116 0.103211653 0.103592904 0.104359344 0.104571616 0.106347854 0.106984152 0.108151146 0.109791511 0.110993668 0.112372343 0.113147505 0.115047199 0.116203310 0.116825451 0.118706137 0.120788559 0.122294875 0.123168152 0.124607492 0.126173976 0.126264467 0.126642539 0.127215922 0.132041878 0.135085140 0.135811506 0.142805845 0.143770272 0.147077332 0.147612948 0.149739865 0.152863701 0.154671734 0.156249189 0.156709478 0.161550690 0.161901922 0.173769569 0.174259950 0.181160611 0.184849976 0.186400851 0.189615319 0.190400115 0.194146603 0.195363568 0.198661566 0.200288745 0.205252459 0.206982011 0.207371860 0.210232032 0.216256909 0.216725749 0.217951610 0.219168543 0.220814760 0.225288888 0.226697319 0.232232798 0.235118733 0.235701755 0.235994399 0.244686825 0.256070743 0.257264335 0.263884710 0.269977648 0.280592988 0.283327818 0.286332920 0.291891771 0.296868745 0.304397178 0.305794234 0.307326697 0.314465640 0.316753193 0.317397397 0.322228425 0.330164817 0.332869750 0.351817370 0.352485295 0.355162433 0.355902340 0.360077841 0.363022177 0.364255245 0.384436757 0.386057116 0.392183931 0.410723297 0.425901878 0.430967548 0.462408024 0.469094456 0.478591695 0.484017358 0.484551747 0.488190276 0.491478646 0.509627287 0.515654786 0.535500069 0.569586167 0.575259226 0.592587796 0.594068446 0.607297853 0.608396449 0.644701002 0.647668423 0.649708103 0.674346771 0.678415621 0.686039170 0.692005627 0.693625939 0.700073382 0.704508002 0.718187368 0.742262451 0.751351910 0.759439254 0.769734225 0.773207596 0.779571582 0.810998976 0.815729105 0.819934225 0.822819266 0.823580218 0.831718350 0.834970588 0.837909256 0.842466815 0.845854377 0.847552108 0.849850522 0.859275663 0.865936068 0.867252082 0.874222628 0.885941996 0.886287537 0.889709296 0.899961618 0.901086024 0.904135047 0.923798602 0.927972548 0.936478000 0.937659043 0.966199298 0.976331036 0.986555114 1.001704580 1.020196169 1.028375169 1.042065957 1.050995535 1.057669373 1.068860469 1.086879446 1.088765544 1.104722044 1.108013502 1.112513016 1.125886100 1.135982920 1.140154731 1.144675584 1.176357739 1.179046746 1.181686684 1.187004272 1.191591440 1.197078876 1.224709210 1.228368090 1.275006229 1.302705603 1.321349956 1.328380426 1.333393482 1.336492050 1.338419552 1.343219428 1.343516944 1.345085935 1.359298738 1.379190048 1.383008890 1.385574844 1.415870057 1.420439192 1.436444927 1.551494995 1.683826765 1.776404397</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">260</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33266009" y3="0.06403523" z3="-0.19152319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37785595" y3="0.17264083" z3="0.4216834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64134455" y3="0.44833104" z3="-0.33933142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73070408" y3="1.24610232" z3="-2.26579957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38452709" y3="0.44928035" z3="-1.18643924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73554375" y3="0.85463279" z3="-3.6716161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64086726" y3="1.75757908" z3="-3.14509648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39709678" y3="2.59869933" z3="-4.63998898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57179481" y3="1.25824375" z3="-4.39100557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52074376" y3="2.93362092" z3="-5.20366723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92708018" y3="-0.47531418" z3="-3.44432749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09249015" y3="0.06387382" z3="-1.00584627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39598615" y3="-1.08189362" z3="-2.00379457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92414208" y3="-0.94801338" z3="-1.83626685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09548678" y3="-2.40702262" z3="-1.8422123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14607856" y3="-3.62391316" z3="0.68345195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01780466" y3="-5.23354341" z3="-4.74195256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24599836" y3="-4.98310675" z3="-3.70250377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84289896" y3="-4.31126633" z3="-1.07842746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77726554" y3="-4.56973025" z3="-2.85129101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55973681" y3="-5.08690946" z3="-3.24189906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85899682" y3="-4.74604113" z3="-1.92524932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49091932" y3="-4.24825972" z3="-1.52304233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80880352" y3="-4.47891883" z3="-3.20045112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35750813" y3="-5.4038585" z3="-3.91715349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89423138" y3="-4.79567627" z3="-1.57911184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03338778" y3="-3.86974087" z3="0.2446458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17441063" y3="-3.65837213" z3="0.88923535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06149225" y3="-4.12140776" z3="0.4546239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17024109" y3="-3.52524975" z3="2.35655513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23022646" y3="-3.34186167" z3="5.15460159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36690907" y3="-3.73036639" z3="3.05892822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00343648" y3="-3.23523439" z3="3.07942537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03063425" y3="-3.14399543" z3="4.46806529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39601956" y3="-3.64076883" z3="4.44782972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28194442" y3="-3.96927707" z3="2.50984409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0432463" y3="-3.10260819" z3="2.57599744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10134869" y3="-2.9382598" z3="5.00708195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33481811" y3="-3.81140978" z3="4.98211948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25125442" y3="-3.27835291" z3="6.24614561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40952393" y3="-3.87837916" z3="-0.61986455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16715837" y3="-3.37223793" z3="-1.0728647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5294613" y3="0.25354064" z3="-4.72344999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08449419" y3="-1.73293141" z3="0.03309816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91326813" y3="-0.98210346" z3="1.19550543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85571336" y3="-0.32612277" z3="1.53104777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37699714" y3="0.5404873" z3="1.22923497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46456013" y3="1.45450263" z3="-0.38842882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97243972" y3="-0.72055242" z3="1.38581778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34545893" y3="1.71811617" z3="2.6856488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88931227" y3="-0.97709824" z3="2.092019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66522723" y3="-0.36286608" z3="3.35113891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23121388" y3="0.77171747" z3="-1.22335774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31108147" y3="2.24291758" z3="-0.38160595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44451922" y3="1.94128097" z3="-0.53862484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00738581" y3="-1.09412334" z3="2.42238563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94415271" y3="-0.25571412" z3="1.14632838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84382484" y3="-1.55598617" z3="0.67881665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39691794" y3="1.16867011" z3="3.6424786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5946706" y3="2.29918874" z3="2.68186517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18322725" y3="2.43695184" z3="2.65102049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80155853" y3="-0.81546273" z3="3.86415069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57996646" y3="-0.54184834" z3="3.93161797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49960372" y3="0.72044844" z3="3.23176151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82926143" y3="-0.69200698" z3="0.99022996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41327431" y3="-2.02234421" z3="0.85239597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76220226" y3="-2.67123164" z3="1.89427862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54451783" y3="-1.97700345" z3="3.08093859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01162407" y3="-0.68051192" z3="3.2748723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66206137" y3="-0.04487019" z3="2.22193237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52739175" y3="-2.52201611" z3="-0.11024141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37447175" y3="-3.68307658" z3="1.77180465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68461131" y3="-2.58119438" z3="4.10369394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82228948" y3="-0.17023634" z3="4.2201351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99718105" y3="0.98983308" z3="2.33692118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78480039" y3="0.47506993" z3="-4.29073893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76582867" y3="-0.49316333" z3="-4.46104022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42212442" y3="-1.68578369" z3="-5.08652351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1388323" y3="-1.91736065" z3="-5.57200021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8353616" y3="-0.94655118" z3="-5.37988409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02565498" y3="1.39949334" z3="-3.75970509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78211586" y3="-0.34643229" z3="-4.09432168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43468392" y3="-2.735291" z3="-5.21987117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08828592" y3="-2.85846999" z3="-6.07362287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85502428" y3="-1.13326806" z3="-5.72071971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35524517" y3="-1.89125404" z3="5.04816277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30806062" y3="-3.72222643" z3="3.93067017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21862063" y3="-3.63391551" z3="-6.00453094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.42977878" y3="-2.65338365" z3="-4.52790998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07175342" y3="1.16513324" z3="-1.48904624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11550871" y3="1.55550069" z3="-2.47123631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44271903" y3="1.48739692" z3="-1.68444483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85895233" y3="2.14699599" z3="-2.81503641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1654497" y3="1.18862621" z3="-0.91888657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91688282" y3="2.38369307" z3="-2.95735488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58214047" y3="2.21849623" z3="-3.64060882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91566049" y3="2.50555472" z3="-3.80773638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86430275" y3="2.49123276" z3="-4.41765426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25181834" y3="3.00821055" z3="-4.71867028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41589831" y3="3.1607482" z3="-3.35258064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3052336" y3="3.57207891" z3="-4.14711478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2251595" y3="4.17244617" z3="-2.76289985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97994615" y3="5.50500071" z3="-2.99626977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05002578" y3="3.88503936" z3="-2.10900498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61763785" y3="6.26154595" z3="-2.52994949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08631614" y3="4.95747312" z3="-4.38276686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90815611" y3="5.90692267" z3="-3.82829912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23864562" y3="5.25405761" z3="-5.00830018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72865642" y3="6.96964921" z3="-4.01362892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4809685" y3="-2.21388601" z3="-0.28852766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44771798" y3="-3.00656716" z3="-1.0550918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01091393" y3="-2.59701342" z3="0.59823463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09608913" y3="-1.39540092" z3="-0.70809176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18145359" y3="-1.431481" z3="-1.13657239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31891886" y3="-0.38952589" z3="-1.48037963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10494332" y3="-1.55649625" z3="-0.93288556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42196815" y3="-2.08263247" z3="-1.99013767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3327,.064,-.1915;7.3779,.1726,.4217;6.6413,.4483,-.3393;4.7307,1.2461,-2.2658;4.3845,.4493,-1.1864;2.7355,.8546,-3.6716;3.6409,1.7576,-3.1451;1.3971,2.5987,-4.64;1.5718,1.2582,-4.391;.5207,2.9336,-5.2037;2.9271,-.4753,-3.4443;3.0925,.0639,-1.0058;2.396,-1.0819,-2.0038;.9241,-.948,-1.8363;3.0955,-2.407,-1.8422;-.1461,-3.6239,.6835;-.0178,-5.2335,-4.742;-.246,-4.9831,-3.7025;-.8429,-4.3113,-1.0784;.7773,-4.5697,-2.8513;-1.5597,-5.0869,-3.2419;-1.859,-4.746,-1.9252;.4909,-4.2483,-1.523;1.8088,-4.4789,-3.2005;-2.3575,-5.4039,-3.9172;-2.8942,-4.7957,-1.5791;-1.0334,-3.8697,.2446;-2.1744,-3.6584,.8892;-3.0615,-4.1214,.4546;-2.1702,-3.5252,2.3566;-2.2302,-3.3419,5.1546;-3.3669,-3.7304,3.0589;-1.0034,-3.2352,3.0794;-1.0306,-3.144,4.4681;-3.396,-3.6408,4.4478;-4.2819,-3.9693,2.5098;-.0432,-3.1026,2.576;-.1013,-2.9383,5.0071;-4.3348,-3.8114,4.9821;-2.2513,-3.2784,6.2461;1.4095,-3.8784,-.6199;2.1672,-3.3722,-1.0729;.5295,.2535,-4.7234;-3.0845,-1.7329,.0331;-2.9133,-.9821,1.1955;-1.8557,-.3261,1.531;-.377,.5405,1.2292;-.4646,1.4545,-.3884;.9724,-.7206,1.3858;-.3455,1.7181,2.6856;-3.8893,-.9771,2.092;-3.6652,-.3629,3.3511;-.2312,.7717,-1.2234;.3111,2.2429,-.3816;-1.4445,1.9413,-.5386;1.0074,-1.0941,2.4224;1.9442,-.2557,1.1463;.8438,-1.556,.6788;-.3969,1.1687,3.6425;.5947,2.2992,2.6819;-1.1832,2.437,2.651;-2.8016,-.8155,3.8642;-4.58,-.5418,3.9316;-3.4996,.7204,3.2318;4.8293,-.692,.9902;4.4133,-2.0223,.8524;3.7622,-2.6712,1.8943;3.5445,-1.977,3.0809;4.0116,-.6805,3.2749;4.6621,-.0449,2.2219;4.5274,-2.522,-.1102;3.3745,-3.6831,1.7718;2.6846,-2.5812,4.1037;3.8223,-.1702,4.2201;4.9972,.9898,2.3369;-.7848,.4751,-4.2907;-1.7658,-.4932,-4.461;-1.4221,-1.6858,-5.0865;-.1388,-1.9174,-5.572;.8354,-.9466,-5.3799;-1.0257,1.3995,-3.7597;-2.7821,-.3464,-4.0943;-2.4347,-2.7353,-5.2199;.0883,-2.8585,-6.0736;1.855,-1.1333,-5.7207;2.3552,-1.8913,5.0482;2.3081,-3.7222,3.9307;-2.2186,-3.6339,-6.0045;-3.4298,-2.6534,-4.5279;7.0718,1.1651,-1.489;6.1155,1.5555,-2.4712;8.4427,1.4874,-1.6844;8.859,2.147,-2.815;9.1654,1.1886,-.9189;9.9169,2.3837,-2.9574;6.5821,2.2185,-3.6406;7.9157,2.5056,-3.8077;5.8643,2.4912,-4.4177;8.2518,3.0082,-4.7187;3.4159,3.1607,-3.3526;2.3052,3.5721,-4.1471;4.2252,4.1724,-2.7629;3.9799,5.505,-2.9963;5.05,3.885,-2.109;4.6176,6.2615,-2.5299;2.0863,4.9575,-4.3828;2.9082,5.9069,-3.8283;1.2386,5.2541,-5.0083;2.7287,6.9696,-4.0136;-4.481,-2.2139,-.2885;-4.4477,-3.0066,-1.0551;-5.0109,-2.597,.5982;-5.0961,-1.3954,-.7081;-2.1815,-1.4315,-1.1366;-2.3189,-.3895,-1.4804;-1.1049,-1.5565,-.9329;-2.422,-2.0826,-1.9901;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416959150</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001947152445 0.000216337885 0.023253448618 0.005315852997</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689503 -0.000132779 0.000069837 0.000112923 0.000257869 0.000323030 0.000360136 0.000434074 0.000602756 0.000827683 0.000940141 0.001044508 0.001226809 0.001327417 0.001371689 0.001413003 0.001561204 0.001784546 0.001876912 0.001928101 0.002155850 0.002343379 0.002580334 0.002664329 0.002684127 0.003027036 0.003122990 0.003430228 0.003520049 0.003913189 0.004462814 0.004727448 0.004749960 0.005089893 0.006020208 0.006116706 0.006243424 0.006649264 0.006956340 0.007743726 0.008120460 0.008235077 0.009326168 0.009514994 0.010070531 0.010585775 0.010728073 0.011135154 0.011877352 0.012261570 0.012970205 0.013114929 0.014146228 0.014592755 0.015359674 0.015521997 0.015877636 0.016386887 0.016956818 0.017491957 0.018153183 0.018565193 0.019489754 0.019648380 0.020099739 0.020823644 0.021225469 0.021424313 0.022598978 0.023170485 0.025012505 0.026356954 0.026794830 0.027663266 0.027830188 0.029526659 0.030322090 0.031637220 0.033299633 0.033649814 0.034100420 0.035795882 0.037048061 0.037737692 0.039585649 0.040069651 0.040896450 0.042395348 0.044066872 0.045000918 0.045458872 0.047127220 0.047969162 0.049258315 0.050455147 0.051013833 0.051233929 0.051566031 0.052485178 0.052694301 0.052926595 0.053113978 0.054734451 0.054947884 0.056026013 0.056275010 0.056544883 0.056713472 0.057223121 0.059121532 0.060546877 0.060970949 0.061717235 0.062373524 0.063321493 0.064523555 0.065363564 0.066044960 0.066553109 0.068380138 0.069091289 0.070316853 0.072745487 0.074502707 0.074793971 0.076487800 0.078489211 0.084078646 0.086633274 0.087133270 0.087617750 0.089181996 0.090573290 0.091376181 0.093990084 0.094766780 0.095803266 0.096426751 0.097850852 0.098831667 0.099323578 0.100194991 0.100898376 0.102479285 0.103211663 0.103593469 0.104359876 0.104571816 0.106348906 0.106984412 0.108151343 0.109791570 0.111000798 0.112375777 0.113180086 0.115047682 0.116204178 0.116825958 0.118706290 0.120791596 0.122295403 0.123169699 0.124608273 0.126176435 0.126269297 0.126643322 0.127219235 0.132043313 0.135085738 0.135811964 0.142809178 0.143773207 0.147077343 0.147612773 0.149743375 0.152865861 0.154671730 0.156251778 0.156713425 0.161552261 0.161901834 0.173771315 0.174260906 0.181179731 0.184850058 0.186400351 0.189615824 0.190400790 0.194147076 0.195370411 0.198668156 0.200288801 0.205252289 0.206987855 0.207372037 0.210232093 0.216280318 0.216731180 0.217956568 0.219172923 0.220819596 0.225290113 0.226697740 0.232239222 0.235120014 0.235703023 0.235994974 0.244686900 0.256073410 0.257264610 0.263886346 0.269977761 0.280611690 0.283327961 0.286333095 0.291894223 0.296882262 0.304398899 0.305794244 0.307327246 0.314466687 0.316754047 0.317398349 0.322228511 0.330166308 0.332869839 0.351818900 0.352519858 0.355163812 0.355908433 0.360077840 0.363027044 0.364255219 0.384437105 0.386057080 0.392184223 0.410723906 0.425906551 0.430968844 0.462411162 0.469104680 0.478595410 0.484048616 0.484552741 0.488200502 0.491478789 0.509630623 0.515656986 0.535503755 0.569585862 0.575261903 0.592591647 0.594068443 0.607305258 0.608399092 0.644703845 0.647668455 0.649708444 0.674346927 0.678430528 0.686048675 0.692005652 0.693625711 0.700073382 0.704522627 0.718212045 0.742264910 0.751357782 0.759440737 0.769747733 0.773208978 0.779573928 0.810999100 0.815730474 0.819934892 0.822820110 0.823587091 0.831722247 0.834971020 0.837909233 0.842468199 0.845854422 0.847552772 0.849852161 0.859282732 0.865939027 0.867253959 0.874224637 0.885955446 0.886288797 0.889709482 0.899961622 0.901086174 0.904135744 0.923798606 0.927972522 0.936478195 0.937670856 0.966201536 0.976347009 0.986589487 1.001705205 1.020196529 1.028375194 1.042066280 1.050997746 1.057669414 1.068860484 1.086881682 1.088768910 1.104722252 1.108031810 1.112516217 1.125949483 1.135982939 1.140181795 1.144676229 1.176358458 1.179047980 1.181706935 1.187004523 1.191592063 1.197180840 1.224709992 1.228369135 1.275006932 1.302710558 1.321363358 1.328382861 1.333393601 1.336492264 1.338423594 1.343235997 1.343518129 1.345086070 1.359299099 1.379219851 1.383014486 1.385601742 1.415874598 1.420439983 1.436467875 1.551495063 1.684054460 1.776412595</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">261</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33342075" y3="0.06496757" z3="-0.18942135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37876254" y3="0.17411483" z3="0.42364425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64238413" y3="0.44943002" z3="-0.33758612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73161798" y3="1.24372151" z3="-2.26568191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38534717" y3="0.44937942" z3="-1.18485178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73456121" y3="0.85366288" z3="-3.6691226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64217981" y3="1.75518443" z3="-3.14554079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39938142" y3="2.59745713" z3="-4.64173328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57120268" y3="1.25817197" z3="-4.3883688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52366938" y3="2.9327479" z3="-5.20612999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92354019" y3="-0.47590394" z3="-3.44013189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09330392" y3="0.06591662" z3="-1.00316778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39554775" y3="-1.08101635" z3="-1.99835284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92403451" y3="-0.94784059" z3="-1.82785783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09608467" y3="-2.40573403" z3="-1.83789328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1450366" y3="-3.61988178" z3="0.67753712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01116089" y3="-5.23624832" z3="-4.74529798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24068543" y3="-4.98401671" z3="-3.70644509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84169002" y3="-4.30704528" z3="-1.08418998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78176419" y3="-4.57222155" z3="-2.85360619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55584466" y3="-5.08333851" z3="-3.24819736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85726627" y3="-4.73949718" z3="-1.93265901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49344211" y3="-4.24863497" z3="-1.52620175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81360884" y3="-4.48339512" z3="-3.20053672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35340483" y3="-5.39876891" z3="-3.92454619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89338131" y3="-4.78544903" z3="-1.58902591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03287912" y3="-3.86486879" z3="0.2384358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17376687" y3="-3.65806934" z3="0.8842981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05982166" y3="-4.12253002" z3="0.4493374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16842764" y3="-3.52822009" z3="2.35189644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2256629" y3="-3.35263236" z3="5.15044001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36348911" y3="-3.73952479" z3="3.05522826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00167572" y3="-3.23560459" z3="3.07400011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02762494" y3="-3.14819369" z3="4.46288036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39114051" y3="-3.65402619" z3="4.44441834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27795519" y3="-3.98087861" z3="2.50670079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04256715" y3="-3.09766182" z3="2.56958799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0988882" y3="-2.93992218" z3="5.0014588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32835067" y3="-3.83016091" z3="4.97953824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24553893" y3="-3.29238426" z3="6.24215987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41133059" y3="-3.88121553" z3="-0.62120624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16946574" y3="-3.37373715" z3="-1.07228381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5275408" y3="0.25375894" z3="-4.71993029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08840993" y3="-1.7325492" z3="0.03319716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91464404" y3="-0.98487098" z3="1.19723791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85553784" y3="-0.33089307" z3="1.53182264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38283735" y3="0.54567862" z3="1.23199662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47047296" y3="1.4557001" z3="-0.3880245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97244065" y3="-0.70871174" z3="1.39468889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36328653" y3="1.72757598" z3="2.68500441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88850789" y3="-0.98208206" z3="2.09632903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66086822" y3="-0.37170561" z3="3.3568696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2313556" y3="0.77173511" z3="-1.22016906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30114375" y3="2.24827775" z3="-0.38115876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45253752" y3="1.93653778" z3="-0.54243566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00673625" y3="-1.08049304" z3="2.43212027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9428563" y3="-0.24112804" z3="1.15553104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8473044" y3="-1.54613084" z3="0.68939235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41254079" y3="1.18091949" z3="3.6433664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57240831" y3="2.31602509" z3="2.6814322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2064807" y3="2.44004398" z3="2.64612639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79545306" y3="-0.82515316" z3="3.86598489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5737937" y3="-0.55284924" z3="3.93985322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49618559" y3="0.71196545" z3="3.24027919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83078082" y3="-0.69011875" z3="0.99338627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41312653" y3="-2.01978938" z3="0.85571734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7615458" y3="-2.66822397" z3="1.89745175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54518147" y3="-1.97417293" z3="3.083893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01504953" y3="-0.67865173" z3="3.27845018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6656415" y3="-0.04337036" z3="2.22530859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52301189" y3="-2.51825912" z3="-0.10952676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3709556" y3="-3.67933544" z3="1.77385401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68606084" y3="-2.57823395" z3="4.10736929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82695045" y3="-0.16853203" z3="4.22353585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00158213" y3="0.99070844" z3="2.3398267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7865599" y3="0.47705818" z3="-4.2878858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76883546" y3="-0.48986935" z3="-4.45669037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42666683" y3="-1.68302887" z3="-5.08232567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14373507" y3="-1.91669607" z3="-5.56826657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8320304" y3="-0.94711835" z3="-5.37519101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02634153" y3="1.40221143" z3="-3.7571305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7849906" y3="-0.34171846" z3="-4.08994974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44053258" y3="-2.73118254" z3="-5.21602538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0815677" y3="-2.85822117" z3="-6.06886161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85164755" y3="-1.13512954" z3="-5.71613023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35908013" y3="-1.88887307" z3="5.05393675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3104253" y3="-3.7187725" z3="3.93555314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22806654" y3="-3.62605904" z3="-6.00598506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4330233" y3="-2.65247069" z3="-4.51961025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07298131" y3="1.16398827" z3="-1.48840891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11674657" y3="1.55238632" z3="-2.47148843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44399417" y3="1.48509887" z3="-1.68422912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86051171" y3="2.14181374" z3="-2.81608328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16654994" y3="1.18761707" z3="-0.91797798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.918536" y3="2.37763858" z3="-2.95872659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58379899" y3="2.21295114" z3="-3.64195475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9175038" y3="2.49905639" z3="-3.8094851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86623925" y3="2.48468958" z3="-4.41958883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2540035" y3="3.00074064" z3="-4.7212532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41908694" y3="3.1587093" z3="-3.35539126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30964125" y3="3.57006734" z3="-4.15153209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22898527" y3="4.17122969" z3="-2.76658442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98726944" y3="5.50306501" z3="-3.00446804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05290993" y3="3.88390128" z3="-2.11145968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62614976" y3="6.25948399" z3="-2.5397431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09381822" y3="4.9551278" z3="-4.39126318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91713318" y3="5.90473019" z3="-3.83866797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24703424" y3="5.25166878" z3="-5.01801788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7401285" y3="6.96715631" z3="-4.02742082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48575751" y3="-2.21333317" z3="-0.28614742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45474173" y3="-3.0031443" z3="-1.05604358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01227785" y3="-2.59974569" z3="0.60136163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10349669" y3="-1.39392342" z3="-0.70056843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18709982" y3="-1.42847276" z3="-1.1371777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32641504" y3="-0.38648125" z3="-1.4790878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11007411" y3="-1.55296744" z3="-0.93473406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42829146" y3="-2.07831949" z3="-1.9916405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3334,.065,-.1894;7.3788,.1741,.4236;6.6424,.4494,-.3376;4.7316,1.2437,-2.2657;4.3853,.4494,-1.1849;2.7346,.8537,-3.6691;3.6422,1.7552,-3.1455;1.3994,2.5975,-4.6417;1.5712,1.2582,-4.3884;.5237,2.9327,-5.2061;2.9235,-.4759,-3.4401;3.0933,.0659,-1.0032;2.3955,-1.081,-1.9984;.924,-.9478,-1.8279;3.0961,-2.4057,-1.8379;-.145,-3.6199,.6775;-.0112,-5.2362,-4.7453;-.2407,-4.984,-3.7064;-.8417,-4.307,-1.0842;.7818,-4.5722,-2.8536;-1.5558,-5.0833,-3.2482;-1.8573,-4.7395,-1.9327;.4934,-4.2486,-1.5262;1.8136,-4.4834,-3.2005;-2.3534,-5.3988,-3.9245;-2.8934,-4.7854,-1.589;-1.0329,-3.8649,.2384;-2.1738,-3.6581,.8843;-3.0598,-4.1225,.4493;-2.1684,-3.5282,2.3519;-2.2257,-3.3526,5.1504;-3.3635,-3.7395,3.0552;-1.0017,-3.2356,3.074;-1.0276,-3.1482,4.4629;-3.3911,-3.654,4.4444;-4.278,-3.9809,2.5067;-.0426,-3.0977,2.5696;-.0989,-2.9399,5.0015;-4.3284,-3.8302,4.9795;-2.2455,-3.2924,6.2422;1.4113,-3.8812,-.6212;2.1695,-3.3737,-1.0723;.5275,.2538,-4.7199;-3.0884,-1.7325,.0332;-2.9146,-.9849,1.1972;-1.8555,-.3309,1.5318;-.3828,.5457,1.232;-.4705,1.4557,-.388;.9724,-.7087,1.3947;-.3633,1.7276,2.685;-3.8885,-.9821,2.0963;-3.6609,-.3717,3.3569;-.2314,.7717,-1.2202;.3011,2.2483,-.3812;-1.4525,1.9365,-.5424;1.0067,-1.0805,2.4321;1.9429,-.2411,1.1555;.8473,-1.5461,.6894;-.4125,1.1809,3.6434;.5724,2.316,2.6814;-1.2065,2.44,2.6461;-2.7955,-.8252,3.866;-4.5738,-.5528,3.9399;-3.4962,.712,3.2403;4.8308,-.6901,.9934;4.4131,-2.0198,.8557;3.7615,-2.6682,1.8975;3.5452,-1.9742,3.0839;4.015,-.6787,3.2785;4.6656,-.0434,2.2253;4.523,-2.5183,-.1095;3.371,-3.6793,1.7739;2.6861,-2.5782,4.1074;3.827,-.1685,4.2235;5.0016,.9907,2.3398;-.7866,.4771,-4.2879;-1.7688,-.4899,-4.4567;-1.4267,-1.683,-5.0823;-.1437,-1.9167,-5.5683;.832,-.9471,-5.3752;-1.0263,1.4022,-3.7571;-2.785,-.3417,-4.0899;-2.4405,-2.7312,-5.216;.0816,-2.8582,-6.0689;1.8516,-1.1351,-5.7161;2.3591,-1.8889,5.0539;2.3104,-3.7188,3.9356;-2.2281,-3.6261,-6.006;-3.433,-2.6525,-4.5196;7.073,1.164,-1.4884;6.1167,1.5524,-2.4715;8.444,1.4851,-1.6842;8.8605,2.1418,-2.8161;9.1665,1.1876,-.918;9.9185,2.3776,-2.9587;6.5838,2.213,-3.642;7.9175,2.4991,-3.8095;5.8662,2.4847,-4.4196;8.254,3.0007,-4.7213;3.4191,3.1587,-3.3554;2.3096,3.5701,-4.1515;4.229,4.1712,-2.7666;3.9873,5.5031,-3.0045;5.0529,3.8839,-2.1115;4.6261,6.2595,-2.5397;2.0938,4.9551,-4.3913;2.9171,5.9047,-3.8387;1.247,5.2517,-5.018;2.7401,6.9672,-4.0274;-4.4858,-2.2133,-.2861;-4.4547,-3.0031,-1.056;-5.0123,-2.5997,.6014;-5.1035,-1.3939,-.7006;-2.1871,-1.4285,-1.1372;-2.3264,-.3865,-1.4791;-1.1101,-1.553,-.9347;-2.4283,-2.0783,-1.9916;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416433429</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001653250539 0.000202096265 0.020905501317 0.005350528481</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030689583 -0.000047176 0.000016364 0.000132295 0.000259317 0.000331266 0.000360032 0.000430290 0.000603388 0.000827236 0.000940236 0.001043146 0.001226791 0.001327636 0.001372236 0.001414309 0.001561359 0.001786128 0.001876461 0.001927871 0.002158527 0.002343070 0.002580987 0.002663749 0.002684181 0.003026101 0.003123460 0.003430247 0.003519937 0.003913190 0.004464892 0.004727426 0.004750542 0.005090446 0.006025772 0.006117878 0.006244919 0.006651359 0.006962662 0.007743812 0.008120867 0.008234863 0.009326512 0.009521398 0.010070435 0.010584770 0.010724905 0.011135370 0.011879260 0.012262805 0.012970276 0.013114788 0.014146701 0.014593561 0.015359999 0.015522298 0.015878445 0.016390380 0.016956320 0.017492274 0.018154588 0.018566043 0.019489861 0.019648417 0.020104229 0.020825070 0.021226685 0.021424393 0.022599185 0.023171827 0.025014335 0.026361168 0.026794844 0.027663568 0.027830013 0.029527447 0.030323299 0.031639835 0.033299806 0.033651185 0.034102490 0.035800206 0.037049029 0.037741087 0.039585419 0.040070701 0.040896624 0.042402184 0.044068657 0.045002164 0.045458935 0.047127281 0.047970899 0.049259707 0.050457246 0.051014689 0.051234953 0.051568356 0.052485529 0.052694801 0.052926646 0.053114168 0.054734787 0.054949472 0.056031161 0.056275006 0.056544891 0.056713515 0.057223333 0.059121838 0.060549443 0.060975477 0.061718702 0.062379080 0.063321486 0.064523581 0.065364205 0.066045173 0.066554569 0.068380142 0.069091685 0.070318333 0.072745865 0.074502694 0.074794398 0.076492066 0.078494838 0.084084117 0.086651600 0.087133984 0.087618154 0.089193028 0.090573393 0.091393347 0.093994257 0.094777465 0.095805690 0.096426849 0.097851248 0.098831901 0.099325035 0.100195321 0.100903002 0.102479741 0.103212096 0.103596033 0.104364587 0.104571984 0.106348732 0.106984576 0.108151276 0.109791843 0.111007524 0.112377585 0.113211670 0.115048903 0.116204235 0.116825946 0.118706394 0.120791888 0.122295641 0.123173254 0.124608164 0.126181649 0.126274978 0.126643114 0.127219529 0.132044046 0.135086044 0.135812085 0.142812250 0.143775587 0.147077436 0.147613699 0.149746996 0.152867083 0.154671714 0.156270498 0.156712068 0.161553442 0.161901679 0.173772374 0.174260980 0.181201463 0.184850167 0.186400235 0.189615865 0.190401817 0.194147479 0.195378912 0.198672050 0.200288893 0.205254268 0.206990375 0.207373796 0.210232098 0.216307206 0.216737903 0.217960214 0.219176308 0.220822059 0.225290350 0.226699823 0.232244200 0.235121922 0.235704020 0.235995450 0.244686933 0.256075345 0.257264591 0.263886650 0.269979063 0.280625629 0.283328226 0.286333404 0.291895042 0.296896997 0.304402648 0.305794506 0.307327556 0.314468673 0.316754075 0.317399163 0.322229030 0.330168894 0.332869934 0.351823711 0.352544627 0.355167382 0.355916920 0.360077931 0.363030229 0.364255218 0.384437116 0.386057555 0.392186703 0.410724165 0.425917762 0.430972325 0.462412466 0.469114054 0.478600528 0.484073961 0.484552953 0.488215510 0.491478795 0.509634337 0.515657336 0.535504141 0.569606088 0.575264864 0.592604980 0.594069108 0.607312047 0.608402057 0.644707776 0.647669294 0.649709432 0.674349218 0.678440228 0.686056994 0.692005831 0.693626161 0.700073563 0.704535897 0.718223984 0.742268304 0.751361663 0.759442750 0.769758214 0.773209092 0.779575321 0.810999400 0.815732705 0.819935268 0.822821298 0.823588656 0.831727926 0.834971548 0.837909222 0.842473606 0.845854689 0.847552926 0.849852176 0.859285783 0.865940503 0.867254251 0.874225908 0.885960537 0.886288799 0.889709831 0.899964024 0.901086355 0.904135872 0.923799519 0.927975221 0.936482518 0.937684637 0.966202970 0.976354304 0.986625037 1.001705210 1.020199267 1.028376270 1.042066922 1.051001412 1.057669435 1.068861074 1.086883945 1.088771976 1.104722976 1.108036740 1.112518530 1.126004097 1.135983001 1.140181382 1.144678690 1.176359538 1.179048081 1.181727836 1.187009570 1.191594189 1.197263728 1.224712305 1.228369510 1.275018463 1.302711391 1.321363976 1.328386598 1.333394531 1.336499615 1.338437835 1.343242656 1.343518170 1.345086325 1.359300866 1.379247304 1.383017025 1.385642060 1.415881474 1.420440576 1.436468280 1.551495174 1.684225928 1.776413800</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">262</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33741856" y3="0.05868459" z3="-0.19118338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38369771" y3="0.16738523" z3="0.41886814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64599033" y3="0.44316671" z3="-0.34095909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73225185" y3="1.24117844" z3="-2.26443992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38786299" y3="0.44406284" z3="-1.1847897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73321343" y3="0.85244366" z3="-3.66584813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64076435" y3="1.75407536" z3="-3.14090541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39432118" y3="2.59813171" z3="-4.63013057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56805115" y3="1.25752245" z3="-4.38214541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51727125" y3="2.93428668" z3="-5.19192004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92446787" y3="-0.47779449" z3="-3.44059437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09608813" y3="0.05892242" z3="-1.00224119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39800224" y3="-1.08630234" z3="-1.99930444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92647928" y3="-0.95426612" z3="-1.82703156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09927506" y3="-2.41098289" z3="-1.84186726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1437311" y3="-3.61529503" z3="0.67528094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0061487" y3="-5.24391696" z3="-4.74330361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23670473" y3="-4.98918448" z3="-3.70533973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83918879" y3="-4.30695059" z3="-1.08510907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7855696" y3="-4.57737594" z3="-2.85217403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55237115" y3="-5.08612225" z3="-3.24844305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8545465" y3="-4.7396169" z3="-1.93386796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49629729" y3="-4.25086567" z3="-1.52574452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8185057" y3="-4.49186606" z3="-3.19828756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34943655" y3="-5.40190493" z3="-3.92504958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89124895" y3="-4.78302027" z3="-1.59125997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03095668" y3="-3.86240408" z3="0.23666944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1719848" y3="-3.65611618" z3="0.88248236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05792955" y3="-4.12145088" z3="0.44783503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16683451" y3="-3.52480708" z3="2.34984245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22379535" y3="-3.34937451" z3="5.14830809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36133146" y3="-3.73861527" z3="3.05329119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0008378" y3="-3.22877648" z3="3.07161241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02656843" y3="-3.14171502" z3="4.46054345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38895307" y3="-3.65303927" z3="4.44245696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27564522" y3="-3.98165018" z3="2.50479853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04258893" y3="-3.08751603" z3="2.56687278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09785947" y3="-2.93183155" z3="4.99912075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32583143" y3="-3.8309916" z3="4.97768456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24338216" y3="-3.28954747" z3="6.24007412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4137536" y3="-3.88282907" z3="-0.620603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17219177" y3="-3.37703638" z3="-1.07255316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52466734" y3="0.25372298" z3="-4.7145216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08870016" y3="-1.73126745" z3="0.03004384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91385758" y3="-0.98326543" z3="1.19350672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85370763" y3="-0.33024384" z3="1.52706114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38425653" y3="0.55188211" z3="1.2262633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47240457" y3="1.4535787" z3="-0.39834342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97516156" y3="-0.69696943" z3="1.39808312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3744059" y3="1.7422138" z3="2.67286499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88705651" y3="-0.97977585" z3="2.09325373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65843282" y3="-0.36939995" z3="3.35346102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22609621" y3="0.76746762" z3="-1.2268699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29266581" y3="2.25244279" z3="-0.39222564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45789115" y3="1.9264657" z3="-0.55790027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00904535" y3="-1.06316775" z3="2.43756659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94523097" y3="-0.2292287" z3="1.15762899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85230437" y3="-1.53837734" z3="0.69695006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42501689" y3="1.20127657" z3="3.63447999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55801736" y3="2.33559721" z3="2.66948977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22111524" y3="2.4500584" z3="2.62612866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7934332" y3="-0.8240177" z3="3.86244062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57137462" y3="-0.54942733" z3="3.93640774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49250915" y3="0.71413199" z3="3.23673076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83488955" y3="-0.69638277" z3="0.9915139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4113931" y3="-2.02426349" z3="0.8529662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75865699" y3="-2.67077" z3="1.89515043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54713745" y3="-1.97681014" z3="3.08301852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02264325" y3="-0.68350511" z3="3.27799395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67451627" y3="-0.05013728" z3="2.22455448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5203789" y3="-2.52323486" z3="-0.11092004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36490585" y3="-3.68029324" z3="1.77194408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68637377" y3="-2.57804994" z3="4.10668041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83849361" y3="-0.17342729" z3="4.22425009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01564556" y3="0.98243348" z3="2.34014527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79002792" y3="0.47659395" z3="-4.28374313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77173457" y3="-0.490786" z3="-4.45471204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42830376" y3="-1.68392713" z3="-5.07941104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14465642" y3="-1.91681965" z3="-5.56324397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83018159" y3="-0.94687884" z3="-5.37001118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03098696" y3="1.40153737" z3="-3.75366915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78849038" y3="-0.34300134" z3="-4.08973765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44143439" y3="-2.73260192" z3="-5.21384334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08219312" y3="-2.85828413" z3="-6.06420072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85008977" y3="-1.13457768" z3="-5.70952606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35953262" y3="-1.88673547" z3="5.05114036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30723253" y3="-3.71817788" z3="3.9349025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22805393" y3="-3.62735602" z3="-6.00345216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43415623" y3="-2.65406693" z3="-4.51810516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07465804" y3="1.15961305" z3="-1.49151119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11685544" y3="1.55008578" z3="-2.47219249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44537612" y3="1.48120495" z3="-1.6892775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85997207" y3="2.14034024" z3="-2.82066756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16933895" y3="1.18233389" z3="-0.92491073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91785521" y3="2.37666732" z3="-2.96478826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58176259" y3="2.21266024" z3="-3.6423813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9151575" y3="2.49914622" z3="-3.81180722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86271668" y3="2.48544011" z3="-4.41830292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25004496" y3="3.00195155" z3="-4.72334135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41669248" y3="3.15756355" z3="-3.34700884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30471303" y3="3.57034708" z3="-4.13887517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22847111" y3="4.16811483" z3="-2.75886824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98463015" y3="5.50092609" z3="-2.99169579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05432773" y3="3.87954348" z3="-2.10678342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62440448" y3="6.25649807" z3="-2.52679328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08717335" y3="4.95601535" z3="-4.37395368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91166144" y3="5.90430239" z3="-3.8214311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23859865" y3="5.25367618" z3="-4.99768989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73335452" y3="6.96724242" z3="-4.00651532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48546349" y3="-2.2132907" z3="-0.28821015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45377697" y3="-3.00414605" z3="-1.05672155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01181603" y3="-2.59907844" z3="0.5996137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10325234" y3="-1.39479289" z3="-0.70381915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18756642" y3="-1.42879838" z3="-1.14075244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3271908" y3="-0.38726419" z3="-1.48437025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1105261" y3="-1.55223219" z3="-0.93775279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42836099" y3="-2.08027233" z3="-1.99406161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3374,.0587,-.1912;7.3837,.1674,.4189;6.646,.4432,-.341;4.7323,1.2412,-2.2644;4.3879,.4441,-1.1848;2.7332,.8524,-3.6658;3.6408,1.7541,-3.1409;1.3943,2.5981,-4.6301;1.5681,1.2575,-4.3821;.5173,2.9343,-5.1919;2.9245,-.4778,-3.4406;3.0961,.0589,-1.0022;2.398,-1.0863,-1.9993;.9265,-.9543,-1.827;3.0993,-2.411,-1.8419;-.1437,-3.6153,.6753;-.0061,-5.2439,-4.7433;-.2367,-4.9892,-3.7053;-.8392,-4.307,-1.0851;.7856,-4.5774,-2.8522;-1.5524,-5.0861,-3.2484;-1.8545,-4.7396,-1.9339;.4963,-4.2509,-1.5257;1.8185,-4.4919,-3.1983;-2.3494,-5.4019,-3.925;-2.8912,-4.783,-1.5913;-1.031,-3.8624,.2367;-2.172,-3.6561,.8825;-3.0579,-4.1215,.4478;-2.1668,-3.5248,2.3498;-2.2238,-3.3494,5.1483;-3.3613,-3.7386,3.0533;-1.0008,-3.2288,3.0716;-1.0266,-3.1417,4.4605;-3.389,-3.653,4.4425;-4.2756,-3.9817,2.5048;-.0426,-3.0875,2.5669;-.0979,-2.9318,4.9991;-4.3258,-3.831,4.9777;-2.2434,-3.2895,6.2401;1.4138,-3.8828,-.6206;2.1722,-3.377,-1.0726;.5247,.2537,-4.7145;-3.0887,-1.7313,.03;-2.9139,-.9833,1.1935;-1.8537,-.3302,1.5271;-.3843,.5519,1.2263;-.4724,1.4536,-.3983;.9752,-.697,1.3981;-.3744,1.7422,2.6729;-3.8871,-.9798,2.0933;-3.6584,-.3694,3.3535;-.2261,.7675,-1.2269;.2927,2.2524,-.3922;-1.4579,1.9265,-.5579;1.009,-1.0632,2.4376;1.9452,-.2292,1.1576;.8523,-1.5384,.697;-.425,1.2013,3.6345;.558,2.3356,2.6695;-1.2211,2.4501,2.6261;-2.7934,-.824,3.8624;-4.5714,-.5494,3.9364;-3.4925,.7141,3.2367;4.8349,-.6964,.9915;4.4114,-2.0243,.853;3.7587,-2.6708,1.8952;3.5471,-1.9768,3.083;4.0226,-.6835,3.278;4.6745,-.0501,2.2246;4.5204,-2.5232,-.1109;3.3649,-3.6803,1.7719;2.6864,-2.578,4.1067;3.8385,-.1734,4.2243;5.0156,.9824,2.3401;-.79,.4766,-4.2837;-1.7717,-.4908,-4.4547;-1.4283,-1.6839,-5.0794;-.1447,-1.9168,-5.5632;.8302,-.9469,-5.37;-1.031,1.4015,-3.7537;-2.7885,-.343,-4.0897;-2.4414,-2.7326,-5.2138;.0822,-2.8583,-6.0642;1.8501,-1.1346,-5.7095;2.3595,-1.8867,5.0511;2.3072,-3.7182,3.9349;-2.2281,-3.6274,-6.0035;-3.4342,-2.6541,-4.5181;7.0747,1.1596,-1.4915;6.1169,1.5501,-2.4722;8.4454,1.4812,-1.6893;8.86,2.1403,-2.8207;9.1693,1.1823,-.9249;9.9179,2.3767,-2.9648;6.5818,2.2127,-3.6424;7.9152,2.4991,-3.8118;5.8627,2.4854,-4.4183;8.25,3.002,-4.7233;3.4167,3.1576,-3.347;2.3047,3.5703,-4.1389;4.2285,4.1681,-2.7589;3.9846,5.5009,-2.9917;5.0543,3.8795,-2.1068;4.6244,6.2565,-2.5268;2.0872,4.956,-4.374;2.9117,5.9043,-3.8214;1.2386,5.2537,-4.9977;2.7334,6.9672,-4.0065;-4.4855,-2.2133,-.2882;-4.4538,-3.0041,-1.0567;-5.0118,-2.5991,.5996;-5.1033,-1.3948,-.7038;-2.1876,-1.4288,-1.1408;-2.3272,-.3873,-1.4844;-1.1105,-1.5522,-.9378;-2.4284,-2.0803,-1.9941;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420359943</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001349837625 0.000164230306 0.026230303120 0.005331315950</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690124 -0.000089545 0.000085855 0.000197545 0.000301061 0.000339003 0.000406611 0.000432941 0.000597308 0.000828039 0.000935826 0.001042660 0.001224455 0.001327958 0.001372255 0.001413943 0.001562532 0.001784944 0.001872611 0.001910591 0.002158095 0.002341727 0.002583367 0.002639203 0.002675485 0.003022025 0.003117315 0.003424828 0.003518642 0.003911238 0.004463840 0.004726515 0.004738282 0.005090620 0.006028335 0.006119145 0.006249948 0.006651821 0.006962376 0.007743601 0.008120784 0.008234510 0.009320584 0.009474882 0.010060798 0.010512525 0.010666343 0.011128097 0.011878155 0.012239717 0.012967165 0.013097580 0.014142384 0.014593349 0.015359396 0.015522482 0.015879330 0.016399893 0.016947224 0.017492205 0.018151398 0.018565851 0.019485785 0.019643922 0.020108551 0.020808307 0.021228174 0.021420000 0.022582085 0.023169814 0.024923394 0.026353678 0.026794899 0.027657635 0.027836169 0.029526886 0.030324307 0.031640225 0.033299268 0.033652186 0.034103563 0.035801747 0.037050044 0.037737909 0.039582306 0.040070984 0.040894053 0.042403934 0.043739440 0.044863426 0.045440870 0.047126873 0.047972407 0.049260720 0.050459080 0.051014901 0.051236889 0.051571670 0.052485768 0.052696446 0.052926669 0.053113928 0.054733723 0.054951312 0.056033557 0.056275172 0.056544522 0.056713716 0.057223467 0.059122836 0.060551203 0.060979271 0.061719469 0.062381460 0.063321769 0.064523286 0.065360164 0.066032838 0.066552176 0.068382394 0.069090434 0.070313150 0.072746372 0.074484218 0.074792681 0.076495078 0.078495805 0.084090723 0.086663323 0.087134906 0.087617510 0.089199493 0.090576217 0.091405866 0.093999740 0.094789186 0.095802439 0.096427230 0.097851562 0.098830983 0.099329072 0.100195521 0.100911042 0.102479936 0.103211556 0.103599707 0.104366273 0.104573713 0.106349384 0.106984648 0.108155079 0.109792525 0.111010733 0.112376205 0.113217997 0.115044664 0.116204415 0.116825896 0.118706365 0.120793633 0.122296224 0.123177921 0.124606129 0.126182766 0.126275996 0.126640349 0.127220009 0.132044945 0.135086657 0.135811896 0.142812365 0.143778261 0.147077912 0.147607795 0.149748670 0.152826803 0.154670495 0.156122318 0.156677744 0.161544125 0.161901759 0.173775438 0.174262984 0.181209504 0.184851568 0.186396152 0.189615769 0.190402313 0.194147736 0.195372930 0.198677250 0.200289411 0.205253059 0.206992706 0.207375099 0.210232248 0.216318987 0.216742272 0.217960044 0.219176345 0.220823766 0.225290330 0.226701638 0.232247093 0.235123554 0.235704429 0.235996695 0.244686843 0.256076776 0.257264668 0.263887107 0.269972731 0.280633263 0.283328977 0.286333716 0.291894098 0.296904982 0.304402572 0.305794763 0.307327586 0.314464807 0.316754445 0.317400205 0.322229188 0.330167014 0.332867118 0.351824769 0.352559903 0.355156581 0.355911742 0.360077181 0.363031868 0.364255022 0.384418018 0.386052134 0.392186223 0.410714911 0.425921050 0.430971616 0.462413596 0.469117144 0.478601537 0.484084189 0.484544361 0.488142487 0.491478561 0.509635125 0.515655160 0.535497228 0.569569461 0.575243409 0.592489415 0.594069396 0.607314318 0.608398375 0.644707319 0.647661253 0.649709052 0.674348080 0.678444601 0.686062023 0.692005694 0.693624314 0.700071413 0.704540745 0.718233064 0.742269122 0.751363995 0.759439821 0.769763694 0.773209980 0.779577249 0.810999054 0.815732757 0.819934605 0.822825964 0.823589014 0.831729799 0.834972276 0.837898078 0.842474589 0.845854999 0.847552015 0.849851833 0.859287579 0.865941522 0.867252606 0.874225051 0.885965422 0.886290115 0.889709823 0.899962461 0.901086876 0.904134577 0.923799917 0.927976020 0.936481277 0.937691104 0.966203378 0.976357296 0.986628849 1.001705273 1.020200491 1.028376496 1.042067165 1.051001464 1.057669454 1.068860035 1.086884526 1.088772501 1.104723069 1.108043112 1.112519726 1.126020938 1.135982975 1.140189015 1.144678263 1.176360078 1.179047790 1.181730530 1.187010548 1.191594261 1.197290121 1.224707553 1.228368636 1.274938579 1.302715035 1.321362616 1.328386546 1.333372974 1.336497926 1.338404985 1.343223238 1.343451744 1.345076507 1.359299648 1.379250296 1.383017894 1.385637369 1.415472452 1.420440612 1.435986372 1.551495100 1.684280078 1.776389814</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">263</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34054333" y3="0.05292737" z3="-0.1942607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38738869" y3="0.16233209" z3="0.41369847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64869556" y3="0.43880738" z3="-0.3448708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73204987" y3="1.23786874" z3="-2.26501132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3897036" y3="0.43899345" z3="-1.18638929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73155394" y3="0.85029771" z3="-3.66418024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63877249" y3="1.7513058" z3="-3.13887044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38729528" y3="2.59661657" z3="-4.61974054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56433758" y3="1.25576213" z3="-4.37675922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50850416" y3="2.93303931" z3="-5.17864932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92462757" y3="-0.4799773" z3="-3.44182016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0985547" y3="0.05313673" z3="-1.00316106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39996061" y3="-1.09089143" z3="-2.00104234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92861957" y3="-0.95887626" z3="-1.82773126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10118403" y3="-2.4158265" z3="-1.84566158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14240046" y3="-3.61792654" z3="0.67728817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00873879" y3="-5.24671079" z3="-4.74232014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23821278" y3="-4.99219446" z3="-3.70405145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83882039" y3="-4.3091315" z3="-1.08324855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78457803" y3="-4.58040098" z3="-2.85165589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55371306" y3="-5.08864282" z3="-3.24603397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85481642" y3="-4.74191824" z3="-1.93123884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49640987" y3="-4.25360358" z3="-1.52497526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81677089" y3="-4.49392955" z3="-3.19846525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35156" y3="-5.40433708" z3="-3.92198106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89110469" y3="-4.78568663" z3="-1.58776161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03009108" y3="-3.86357861" z3="0.23830625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17121716" y3="-3.65437642" z3="0.88296876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05744623" y3="-4.11903641" z3="0.44846724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1670901" y3="-3.52022101" z3="2.35005587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22676472" y3="-3.33752846" z3="5.14795106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36258582" y3="-3.73060945" z3="3.05291662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0012225" y3="-3.22439689" z3="3.07221341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02833203" y3="-3.133688" z3="4.46083797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3914444" y3="-3.64158301" z3="4.44182805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27637528" y3="-3.97406344" z3="2.50421392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04207638" y3="-3.08608817" z3="2.56797038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10021137" y3="-2.92325983" z3="4.99962778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32899895" y3="-3.81698891" z3="4.97664152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24753015" y3="-3.27462792" z3="6.23949237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41498832" y3="-3.88542613" z3="-0.62075782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17387298" y3="-3.38154545" z3="-1.07388126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5226946" y3="0.25087721" z3="-4.71214191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08401477" y3="-1.72960023" z3="0.02604597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91016298" y3="-0.979781" z3="1.18845833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84985034" y3="-0.32757985" z3="1.5227101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37963614" y3="0.55291775" z3="1.22268182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4654136" y3="1.45311959" z3="-0.40306428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97827189" y3="-0.69711243" z3="1.39810373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36983336" y3="1.74468257" z3="2.66803756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88500365" y3="-0.97320876" z3="2.08650505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65761278" y3="-0.36003902" z3="3.34566222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21725536" y3="0.76614115" z3="-1.23033899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29891583" y3="2.25276499" z3="-0.39671096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45094677" y3="1.92458862" z3="-0.5648229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01090452" y3="-1.06108408" z3="2.43856399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9490273" y3="-0.2310745" z3="1.15723949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85511607" y3="-1.54003789" z3="0.69901657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42186898" y3="1.20491208" z3="3.63010488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56377479" y3="2.33638532" z3="2.6647418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21526156" y3="2.45392673" z3="2.61998331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79476487" y3="-0.81507449" z3="3.8576286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57224766" y3="-0.53623945" z3="3.92749738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4888406" y3="0.72270126" z3="3.22639938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83907868" y3="-0.70197529" z3="0.98901541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41359772" y3="-2.02920997" z3="0.85135906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75960947" y3="-2.67410507" z3="1.89379679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54835855" y3="-1.97886461" z3="3.08066941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02634694" y3="-0.68634933" z3="3.2751446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67978642" y3="-0.05482878" z3="2.22159518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51963266" y3="-2.528143" z3="-0.11379639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3631322" y3="-3.68287596" z3="1.77046159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68572939" y3="-2.57750285" z3="4.10427287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84231191" y3="-0.17509019" z3="4.22058309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02219697" y3="0.97723175" z3="2.33622746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79298921" y3="0.47162065" z3="-4.28342382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77332713" y3="-0.49629371" z3="-4.45714059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42758488" y3="-1.68840589" z3="-5.08272635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14292674" y3="-1.91939096" z3="-5.56521658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83049094" y3="-0.94842087" z3="-5.36894158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03586399" y3="1.39530547" z3="-3.75168953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79084309" y3="-0.35018369" z3="-4.09348697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43966348" y3="-2.7379601" z3="-5.21912862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08549242" y3="-2.85993413" z3="-6.06630716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85114952" y3="-1.1343264" z3="-5.70748315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3553404" y3="-1.88264756" z3="5.04571155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3100653" y3="-3.71897272" z3="3.93692381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22057334" y3="-3.63738756" z3="-6.0020565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43773245" y3="-2.65533594" z3="-4.53105289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07540688" y3="1.15785376" z3="-1.49446356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11608278" y3="1.54950323" z3="-2.47323144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4455149" y3="1.48139591" z3="-1.69295571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85798971" y3="2.14360858" z3="-2.82309582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1707375" y3="1.18139441" z3="-0.93021434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91557145" y3="2.3816697" z3="-2.96775548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57889392" y3="2.21627079" z3="-3.64190903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91168448" y3="2.50445974" z3="-3.81204647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85870712" y3="2.49058423" z3="-4.41621137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24500441" y3="3.01082185" z3="-4.72239236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41100546" y3="3.15538347" z3="-3.33879231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29636977" y3="3.56880071" z3="-4.12654504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22115792" y3="4.16601137" z3="-2.74738063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97407327" y3="5.49887202" z3="-2.97452929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04931523" y3="3.87655118" z3="-2.09856432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61315369" y3="6.25400952" z3="-2.50791997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07490123" y3="4.95496959" z3="-4.35508973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89823155" y3="5.90306376" z3="-3.80014295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22399391" y3="5.25336279" z3="-4.97533761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71692717" y3="6.96633995" z3="-3.98028501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48134503" y3="-2.20987153" z3="-0.2934669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45032611" y3="-3.0011673" z3="-1.06185551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00891754" y3="-2.59439477" z3="0.59426878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09806258" y3="-1.39078845" z3="-0.70984879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18055872" y3="-1.43010774" z3="-1.14363079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31891221" y3="-0.38917788" z3="-1.48966277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10413086" y3="-1.55369548" z3="-0.93837878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42027113" y3="-2.08321129" z3="-1.99617236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3405,.0529,-.1943;7.3874,.1623,.4137;6.6487,.4388,-.3449;4.732,1.2379,-2.265;4.3897,.439,-1.1864;2.7316,.8503,-3.6642;3.6388,1.7513,-3.1389;1.3873,2.5966,-4.6197;1.5643,1.2558,-4.3768;.5085,2.933,-5.1786;2.9246,-.48,-3.4418;3.0986,.0531,-1.0032;2.4,-1.0909,-2.001;.9286,-.9589,-1.8277;3.1012,-2.4158,-1.8457;-.1424,-3.6179,.6773;-.0087,-5.2467,-4.7423;-.2382,-4.9922,-3.7041;-.8388,-4.3091,-1.0832;.7846,-4.5804,-2.8517;-1.5537,-5.0886,-3.246;-1.8548,-4.7419,-1.9312;.4964,-4.2536,-1.525;1.8168,-4.4939,-3.1985;-2.3516,-5.4043,-3.922;-2.8911,-4.7857,-1.5878;-1.0301,-3.8636,.2383;-2.1712,-3.6544,.883;-3.0574,-4.119,.4485;-2.1671,-3.5202,2.3501;-2.2268,-3.3375,5.148;-3.3626,-3.7306,3.0529;-1.0012,-3.2244,3.0722;-1.0283,-3.1337,4.4608;-3.3914,-3.6416,4.4418;-4.2764,-3.9741,2.5042;-.0421,-3.0861,2.568;-.1002,-2.9233,4.9996;-4.329,-3.817,4.9766;-2.2475,-3.2746,6.2395;1.415,-3.8854,-.6208;2.1739,-3.3815,-1.0739;.5227,.2509,-4.7121;-3.084,-1.7296,.026;-2.9102,-.9798,1.1885;-1.8499,-.3276,1.5227;-.3796,.5529,1.2227;-.4654,1.4531,-.4031;.9783,-.6971,1.3981;-.3698,1.7447,2.668;-3.885,-.9732,2.0865;-3.6576,-.36,3.3457;-.2173,.7661,-1.2303;.2989,2.2528,-.3967;-1.4509,1.9246,-.5648;1.0109,-1.0611,2.4386;1.949,-.2311,1.1572;.8551,-1.54,.699;-.4219,1.2049,3.6301;.5638,2.3364,2.6647;-1.2153,2.4539,2.62;-2.7948,-.8151,3.8576;-4.5722,-.5362,3.9275;-3.4888,.7227,3.2264;4.8391,-.702,.989;4.4136,-2.0292,.8514;3.7596,-2.6741,1.8938;3.5484,-1.9789,3.0807;4.0263,-.6863,3.2751;4.6798,-.0548,2.2216;4.5196,-2.5281,-.1138;3.3631,-3.6829,1.7705;2.6857,-2.5775,4.1043;3.8423,-.1751,4.2206;5.0222,.9772,2.3362;-.793,.4716,-4.2834;-1.7733,-.4963,-4.4571;-1.4276,-1.6884,-5.0827;-.1429,-1.9194,-5.5652;.8305,-.9484,-5.3689;-1.0359,1.3953,-3.7517;-2.7908,-.3502,-4.0935;-2.4397,-2.738,-5.2191;.0855,-2.8599,-6.0663;1.8511,-1.1343,-5.7075;2.3553,-1.8826,5.0457;2.3101,-3.719,3.9369;-2.2206,-3.6374,-6.0021;-3.4377,-2.6553,-4.5311;7.0754,1.1579,-1.4945;6.1161,1.5495,-2.4732;8.4455,1.4814,-1.693;8.858,2.1436,-2.8231;9.1707,1.1814,-.9302;9.9156,2.3817,-2.9678;6.5789,2.2163,-3.6419;7.9117,2.5045,-3.812;5.8587,2.4906,-4.4162;8.245,3.0108,-4.7224;3.411,3.1554,-3.3388;2.2964,3.5688,-4.1265;4.2212,4.166,-2.7474;3.9741,5.4989,-2.9745;5.0493,3.8766,-2.0986;4.6132,6.254,-2.5079;2.0749,4.955,-4.3551;2.8982,5.9031,-3.8001;1.224,5.2534,-4.9753;2.7169,6.9663,-3.9803;-4.4813,-2.2099,-.2935;-4.4503,-3.0012,-1.0619;-5.0089,-2.5944,.5943;-5.0981,-1.3908,-.7098;-2.1806,-1.4301,-1.1436;-2.3189,-.3892,-1.4897;-1.1041,-1.5537,-.9384;-2.4203,-2.0832,-1.9962;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650426873344</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000834187596 0.000114670054 0.016529277087 0.005347027012</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030691209 -0.000060910 0.000005357 0.000151991 0.000320161 0.000375929 0.000417507 0.000578281 0.000597959 0.000820222 0.000917101 0.001033415 0.001226579 0.001325848 0.001361762 0.001412678 0.001553997 0.001783720 0.001861267 0.001905243 0.002159493 0.002338717 0.002572726 0.002639542 0.002674717 0.003021009 0.003109095 0.003414613 0.003517392 0.003889034 0.004462405 0.004726398 0.004732563 0.005089758 0.006030409 0.006115492 0.006252872 0.006651786 0.006963704 0.007742984 0.008120907 0.008234319 0.009306494 0.009434111 0.010056711 0.010474881 0.010669304 0.011128605 0.011874613 0.012220458 0.012951254 0.013069085 0.014142208 0.014594396 0.015349303 0.015523382 0.015877559 0.016403371 0.016875563 0.017490847 0.018150439 0.018566361 0.019481535 0.019636711 0.020108950 0.020804434 0.021228871 0.021413697 0.022566157 0.023164121 0.024826650 0.026353555 0.026794806 0.027662821 0.027835004 0.029529133 0.030324513 0.031636763 0.033297062 0.033652636 0.034102753 0.035802132 0.037049589 0.037718428 0.039582111 0.040071954 0.040890544 0.042401420 0.043422835 0.044790688 0.045434380 0.047124497 0.047973902 0.049261584 0.050459885 0.051014649 0.051236810 0.051573591 0.052486039 0.052695003 0.052926703 0.053113065 0.054733397 0.054949172 0.056038329 0.056275021 0.056545752 0.056713983 0.057223318 0.059123592 0.060553655 0.060980748 0.061720022 0.062379569 0.063321881 0.064523423 0.065357635 0.066031195 0.066552172 0.068371714 0.069086536 0.070306739 0.072747274 0.074473600 0.074792683 0.076494257 0.078498302 0.084092324 0.086667665 0.087132778 0.087618963 0.089203931 0.090576045 0.091410163 0.094011242 0.094792933 0.095805672 0.096426855 0.097851732 0.098829038 0.099331705 0.100196642 0.100913342 0.102479811 0.103211764 0.103601914 0.104371311 0.104576205 0.106349608 0.106984055 0.108156414 0.109790400 0.111012729 0.112383247 0.113237721 0.115050781 0.116205338 0.116825586 0.118706015 0.120795421 0.122299934 0.123170691 0.124604712 0.126182059 0.126277939 0.126645778 0.127222991 0.132047970 0.135085657 0.135813155 0.142812296 0.143780364 0.147077788 0.147601606 0.149750298 0.152758068 0.154670644 0.156084229 0.156672134 0.161534057 0.161902986 0.173772023 0.174265739 0.181231864 0.184861187 0.186398725 0.189614012 0.190400512 0.194146503 0.195379112 0.198679025 0.200291165 0.205252000 0.206993829 0.207374722 0.210232269 0.216324402 0.216743858 0.217950363 0.219179458 0.220824976 0.225285785 0.226702223 0.232250410 0.235123838 0.235704958 0.235998425 0.244687282 0.256077113 0.257264325 0.263887387 0.269973668 0.280639337 0.283331213 0.286334063 0.291897617 0.296905916 0.304406388 0.305796420 0.307321575 0.314461462 0.316754106 0.317400247 0.322231602 0.330154908 0.332867467 0.351824878 0.352564889 0.355146750 0.355904821 0.360077125 0.363031030 0.364254271 0.384389978 0.386052403 0.392184828 0.410693544 0.425925201 0.430974323 0.462414786 0.469119435 0.478602789 0.484091376 0.484521523 0.488082868 0.491468330 0.509639233 0.515642799 0.535484994 0.569549458 0.575236330 0.592427682 0.594070725 0.607309504 0.608398602 0.644703466 0.647656988 0.649711264 0.674347911 0.678442213 0.686066005 0.692007523 0.693623193 0.700054670 0.704544894 0.718240783 0.742270403 0.751369335 0.759441035 0.769774706 0.773211624 0.779578274 0.810999430 0.815730991 0.819931440 0.822830865 0.823590973 0.831729919 0.834972750 0.837895206 0.842477718 0.845856685 0.847553939 0.849852089 0.859288026 0.865941418 0.867257249 0.874228555 0.885968416 0.886293234 0.889710686 0.899959224 0.901086443 0.904134550 0.923801388 0.927974930 0.936481953 0.937716064 0.966203889 0.976358422 0.986640145 1.001705218 1.020205408 1.028378658 1.042070279 1.051005362 1.057669208 1.068857909 1.086884834 1.088772400 1.104723372 1.108040859 1.112522326 1.126038725 1.135983397 1.140220910 1.144678416 1.176366059 1.179048046 1.181736311 1.187015589 1.191594695 1.197315901 1.224703896 1.228365509 1.274905322 1.302722423 1.321363413 1.328388232 1.333362873 1.336507687 1.338369314 1.343143663 1.343403538 1.345072233 1.359292055 1.379255100 1.383016219 1.385649317 1.415088262 1.420440493 1.435505477 1.551495497 1.684335311 1.776303440</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">264</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34169772" y3="0.04767512" z3="-0.19371405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38806325" y3="0.16323828" z3="0.41508515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64870483" y3="0.43787175" z3="-0.34354978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73005175" y3="1.23429073" z3="-2.26266532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38984474" y3="0.43234354" z3="-1.18545191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72939409" y3="0.84558449" z3="-3.66193557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63513838" y3="1.74750682" z3="-3.13458793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38210161" y3="2.59188258" z3="-4.61312435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56118061" y3="1.25053842" z3="-4.37335314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50271888" y3="2.92814213" z3="-5.17118852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92523884" y3="-0.4850747" z3="-3.44259094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09949675" y3="0.04316493" z3="-1.00248946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4017148" y3="-1.09945237" z3="-2.00264015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93024718" y3="-0.968985" z3="-1.82837204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10395601" y3="-2.42409305" z3="-1.84984809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14125773" y3="-3.61454308" z3="0.67300281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01271103" y3="-5.25420697" z3="-4.74308609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24134993" y3="-4.99732045" z3="-3.70521016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83928401" y3="-4.30886751" z3="-1.08543735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78291156" y3="-4.58754865" z3="-2.85357146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55691137" y3="-5.08941878" z3="-3.24689242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85670879" y3="-4.73992832" z3="-1.93257072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49595693" y3="-4.25797275" z3="-1.52732375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.815889" y3="-4.50608302" z3="-3.20082441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35530102" y3="-5.40443471" z3="-3.92210578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89324027" y3="-4.7796878" z3="-1.58874637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02918831" y3="-3.86066732" z3="0.2354201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16965672" y3="-3.64992797" z3="0.88075834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0565771" y3="-4.11434701" z3="0.44737342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16461495" y3="-3.51431778" z3="2.34766093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22247968" y3="-3.33028328" z3="5.14551996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3598847" y3="-3.72348617" z3="3.05117686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.998312" y3="-3.21858113" z3="3.06905127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02455032" y3="-3.12724486" z3="4.45769933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3879661" y3="-3.63361369" z3="4.44006891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.274397" y3="-3.96624424" z3="2.5029292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03961324" y3="-3.0806216" z3="2.56412994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09590953" y3="-2.91747987" z3="4.99618437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32535215" y3="-3.80803644" z3="4.97538699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24247147" y3="-3.26684096" z3="6.23708683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41564909" y3="-3.891491" z3="-0.62372757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17517363" y3="-3.38944509" z3="-1.07747253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52019567" y3="0.24575267" z3="-4.71031441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08180511" y3="-1.72513231" z3="0.02273634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90645135" y3="-0.97466891" z3="1.18445795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8445933" y3="-0.32420466" z3="1.51757994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37441754" y3="0.55707565" z3="1.21910416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45572766" y3="1.45207999" z3="-0.40968199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98392154" y3="-0.69172139" z3="1.40186078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37031937" y3="1.75368676" z3="2.66067953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88094483" y3="-0.96588262" z3="2.08284288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65241641" y3="-0.3523188" z3="3.34152824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20847075" y3="0.7620262" z3="-1.23470551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31050959" y3="2.24974837" z3="-0.40471557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43979307" y3="1.92590519" z3="-0.57412639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0144018" y3="-1.05293238" z3="2.44333391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95483314" y3="-0.2258351" z3="1.16196579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86242236" y3="-1.53655187" z3="0.70444934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42515949" y3="1.21683587" z3="3.62435865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56223968" y3="2.3468411" z3="2.65889564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21663129" y3="2.46158357" z3="2.60725366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7905325" y3="-0.8089806" z3="3.85392813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56734844" y3="-0.52636396" z3="3.92309854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48155808" y3="0.7299525" z3="3.22149204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84158688" y3="-0.70845426" z3="0.98927163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41220716" y3="-2.03440189" z3="0.85052641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75895085" y3="-2.67900255" z3="1.8936436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55208611" y3="-1.98477183" z3="3.0821819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03409015" y3="-0.69390181" z3="3.27750992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6871784" y3="-0.06282078" z3="2.22346791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51649242" y3="-2.53285421" z3="-0.11429311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36038865" y3="-3.68671215" z3="1.7702935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68918994" y3="-2.58220109" z3="4.106223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85369646" y3="-0.18339485" z3="4.22430961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03317698" y3="0.968107" z3="2.33921215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79608407" y3="0.46676035" z3="-4.28368153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77665837" y3="-0.50055111" z3="-4.46103331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43035546" y3="-1.69237494" z3="-5.08656995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14479784" y3="-1.92367632" z3="-5.56598883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82861526" y3="-0.95325107" z3="-5.3677011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03955783" y3="1.3900054" z3="-3.75184511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79472654" y3="-0.35410519" z3="-4.09930726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44307073" y3="-2.74109505" z3="-5.22535645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08451092" y3="-2.864001" z3="-6.06782257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84978496" y3="-1.13939672" z3="-5.70420905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35660801" y3="-1.88532525" z3="5.04495615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31410805" y3="-3.72446839" z3="3.94052754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2208884" y3="-3.64364425" z3="-6.0039291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44487079" y3="-2.65436395" z3="-4.54329793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07341633" y3="1.15959304" z3="-1.49219997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11309015" y3="1.54954984" z3="-2.47065555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44237375" y3="1.48818011" z3="-1.68971924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85283624" y3="2.15405701" z3="-2.81850895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16841054" y3="1.18972653" z3="-0.92712302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90960144" y3="2.39667506" z3="-2.96217908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5738141" y3="2.21908698" z3="-3.63835719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9055778" y3="2.51267346" z3="-3.80740446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85280011" y3="2.49164751" z3="-4.41255932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2373515" y3="3.02161803" z3="-4.71676066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40525799" y3="3.15132387" z3="-3.33154246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28961173" y3="3.56463248" z3="-4.11788544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21441054" y3="4.16140258" z3="-2.73875824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96459174" y3="5.49463287" z3="-2.96223132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04326946" y3="3.87186665" z3="-2.09091513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60255887" y3="6.24976759" z3="-2.49403689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06575251" y3="4.950899" z3="-4.34322328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88764341" y3="5.89903235" z3="-3.78632634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21425321" y3="5.24921771" z3="-4.96265572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70442234" y3="6.96245361" z3="-3.96375574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47938538" y3="-2.20452717" z3="-0.2959093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44884025" y3="-2.99586965" z3="-1.06384878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00689195" y3="-2.58860447" z3="0.59196757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09547397" y3="-1.38516948" z3="-0.71245283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17842022" y3="-1.4276657" z3="-1.14756022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31582161" y3="-0.38695313" z3="-1.49446947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.101885" y3="-1.55222486" z3="-0.94282528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41907005" y3="-2.08134796" z3="-1.99930719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3417,.0477,-.1937;7.3881,.1632,.4151;6.6487,.4379,-.3435;4.7301,1.2343,-2.2627;4.3898,.4323,-1.1855;2.7294,.8456,-3.6619;3.6351,1.7475,-3.1346;1.3821,2.5919,-4.6131;1.5612,1.2505,-4.3734;.5027,2.9281,-5.1712;2.9252,-.4851,-3.4426;3.0995,.0432,-1.0025;2.4017,-1.0995,-2.0026;.9302,-.969,-1.8284;3.104,-2.4241,-1.8498;-.1413,-3.6145,.673;-.0127,-5.2542,-4.7431;-.2413,-4.9973,-3.7052;-.8393,-4.3089,-1.0854;.7829,-4.5875,-2.8536;-1.5569,-5.0894,-3.2469;-1.8567,-4.7399,-1.9326;.496,-4.258,-1.5273;1.8159,-4.5061,-3.2008;-2.3553,-5.4044,-3.9221;-2.8932,-4.7797,-1.5887;-1.0292,-3.8607,.2354;-2.1697,-3.6499,.8808;-3.0566,-4.1143,.4474;-2.1646,-3.5143,2.3477;-2.2225,-3.3303,5.1455;-3.3599,-3.7235,3.0512;-.9983,-3.2186,3.0691;-1.0246,-3.1272,4.4577;-3.388,-3.6336,4.4401;-4.2744,-3.9662,2.5029;-.0396,-3.0806,2.5641;-.0959,-2.9175,4.9962;-4.3254,-3.808,4.9754;-2.2425,-3.2668,6.2371;1.4156,-3.8915,-.6237;2.1752,-3.3894,-1.0775;.5202,.2458,-4.7103;-3.0818,-1.7251,.0227;-2.9065,-.9747,1.1845;-1.8446,-.3242,1.5176;-.3744,.5571,1.2191;-.4557,1.4521,-.4097;.9839,-.6917,1.4019;-.3703,1.7537,2.6607;-3.8809,-.9659,2.0828;-3.6524,-.3523,3.3415;-.2085,.762,-1.2347;.3105,2.2497,-.4047;-1.4398,1.9259,-.5741;1.0144,-1.0529,2.4433;1.9548,-.2258,1.162;.8624,-1.5366,.7044;-.4252,1.2168,3.6244;.5622,2.3468,2.6589;-1.2166,2.4616,2.6073;-2.7905,-.809,3.8539;-4.5673,-.5264,3.9231;-3.4816,.73,3.2215;4.8416,-.7085,.9893;4.4122,-2.0344,.8505;3.759,-2.679,1.8936;3.5521,-1.9848,3.0822;4.0341,-.6939,3.2775;4.6872,-.0628,2.2235;4.5165,-2.5329,-.1143;3.3604,-3.6867,1.7703;2.6892,-2.5822,4.1062;3.8537,-.1834,4.2243;5.0332,.9681,2.3392;-.7961,.4668,-4.2837;-1.7767,-.5006,-4.461;-1.4304,-1.6924,-5.0866;-.1448,-1.9237,-5.566;.8286,-.9533,-5.3677;-1.0396,1.39,-3.7518;-2.7947,-.3541,-4.0993;-2.4431,-2.7411,-5.2254;.0845,-2.864,-6.0678;1.8498,-1.1394,-5.7042;2.3566,-1.8853,5.045;2.3141,-3.7245,3.9405;-2.2209,-3.6436,-6.0039;-3.4449,-2.6544,-4.5433;7.0734,1.1596,-1.4922;6.1131,1.5495,-2.4707;8.4424,1.4882,-1.6897;8.8528,2.1541,-2.8185;9.1684,1.1897,-.9271;9.9096,2.3967,-2.9622;6.5738,2.2191,-3.6384;7.9056,2.5127,-3.8074;5.8528,2.4916,-4.4126;8.2374,3.0216,-4.7168;3.4053,3.1513,-3.3315;2.2896,3.5646,-4.1179;4.2144,4.1614,-2.7388;3.9646,5.4946,-2.9622;5.0433,3.8719,-2.0909;4.6026,6.2498,-2.494;2.0658,4.9509,-4.3432;2.8876,5.899,-3.7863;1.2143,5.2492,-4.9627;2.7044,6.9625,-3.9638;-4.4794,-2.2045,-.2959;-4.4488,-2.9959,-1.0638;-5.0069,-2.5886,.592;-5.0955,-1.3852,-.7125;-2.1784,-1.4277,-1.1476;-2.3158,-.387,-1.4945;-1.1019,-1.5522,-.9428;-2.4191,-2.0813,-1.9993;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650427190705</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000946207099 0.000122335771 0.021366264290 0.005375054040</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690815 -0.000035315 0.000028558 0.000038898 0.000173369 0.000373751 0.000422400 0.000572009 0.000714468 0.000811776 0.000895855 0.001031555 0.001223836 0.001326798 0.001365723 0.001401607 0.001557747 0.001662703 0.001788862 0.001888594 0.002172213 0.002319470 0.002461911 0.002576977 0.002676445 0.003009722 0.003069501 0.003405396 0.003516433 0.003886817 0.004449575 0.004631564 0.004726994 0.005087516 0.006030639 0.006089126 0.006251252 0.006647986 0.006936512 0.007715906 0.008118128 0.008199938 0.008460486 0.009347384 0.009966925 0.010169794 0.010640796 0.011103662 0.011874391 0.012146386 0.012909031 0.013045655 0.014144158 0.014592817 0.015301813 0.015523346 0.015875998 0.016396247 0.016791191 0.017487819 0.018129924 0.018558803 0.019441712 0.019574184 0.020096708 0.020704560 0.021231015 0.021383236 0.022460496 0.023137069 0.024253550 0.026360066 0.026794876 0.027651506 0.027825720 0.029528828 0.030323951 0.031611303 0.033292294 0.033655319 0.034103127 0.035807636 0.037033716 0.037539759 0.039563091 0.040056560 0.040831744 0.041191997 0.042443601 0.044674211 0.045421010 0.047119001 0.047973468 0.049264347 0.050463226 0.051015176 0.051235736 0.051575668 0.052486433 0.052694897 0.052926725 0.053112466 0.054731515 0.054948160 0.056039701 0.056275123 0.056546166 0.056713780 0.057223322 0.059123967 0.060557436 0.060992009 0.061719909 0.062374724 0.063322208 0.064519969 0.065330228 0.065982072 0.066543630 0.068357192 0.069073144 0.070282286 0.072745426 0.074376859 0.074790123 0.076507906 0.078512571 0.084106107 0.086693525 0.087132497 0.087616713 0.089228210 0.090564676 0.091439456 0.094020238 0.094803760 0.095781972 0.096426612 0.097851938 0.098831167 0.099345508 0.100196742 0.100923500 0.102479845 0.103210906 0.103606075 0.104372779 0.104576229 0.106347042 0.106984661 0.108158142 0.109783241 0.111017198 0.112376900 0.113237144 0.115029139 0.116205672 0.116821612 0.118705603 0.120796586 0.122299442 0.123170909 0.124592358 0.126181087 0.126277871 0.126640330 0.127232493 0.132049087 0.135083515 0.135812866 0.142808568 0.143785879 0.147078453 0.147556417 0.149753281 0.152287123 0.154668713 0.155293445 0.156631243 0.161491488 0.161903520 0.173762272 0.174260444 0.181258927 0.184858916 0.186394327 0.189613076 0.190400722 0.194148635 0.195361381 0.198682449 0.200292618 0.205243784 0.206998795 0.207376098 0.210231679 0.216356766 0.216754883 0.217956173 0.219192099 0.220827227 0.225277236 0.226699910 0.232257141 0.235122726 0.235705021 0.235993923 0.244683989 0.256079185 0.257264317 0.263882262 0.269954438 0.280661297 0.283331655 0.286333725 0.291903391 0.296901170 0.304403336 0.305796481 0.307320327 0.314413811 0.316752332 0.317400092 0.322232051 0.330099731 0.332850445 0.351828216 0.352593779 0.355088176 0.355849454 0.360075048 0.363026786 0.364254551 0.384184241 0.386044031 0.392183931 0.410577410 0.425932334 0.430970108 0.462417303 0.469127875 0.478612239 0.484122664 0.484481289 0.487587952 0.491467863 0.509636650 0.515602923 0.535440482 0.569293339 0.575123708 0.591778407 0.594070967 0.607295665 0.608384892 0.644700818 0.647571730 0.649702864 0.674346539 0.678401893 0.686073959 0.692007410 0.693622152 0.700032651 0.704554651 0.718139082 0.742254544 0.751371098 0.759436370 0.769790391 0.773212335 0.779578568 0.810999475 0.815726170 0.819911685 0.822834632 0.823590864 0.831731344 0.834973022 0.837842573 0.842479791 0.845856893 0.847549847 0.849851778 0.859288584 0.865941400 0.867259887 0.874227827 0.885980354 0.886294526 0.889711586 0.899957735 0.901086126 0.904124650 0.923803180 0.927975072 0.936481065 0.937720699 0.966204345 0.976363032 0.986651303 1.001705620 1.020203793 1.028378974 1.042068394 1.051005879 1.057669149 1.068856415 1.086886742 1.088772818 1.104718838 1.108053900 1.112524444 1.126071098 1.135983739 1.140225053 1.144677130 1.176362646 1.179048096 1.181741630 1.187014161 1.191595125 1.197360162 1.224684545 1.228355364 1.274203670 1.302706739 1.321334336 1.328385649 1.333180144 1.336481392 1.338132500 1.342414725 1.343307384 1.345028908 1.359285699 1.379267319 1.383013958 1.385653023 1.410982861 1.420443567 1.432196894 1.551493490 1.684375118 1.776131355</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">265</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.342841" y3="0.05142129" z3="-0.19348214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39078163" y3="0.16317635" z3="0.41068901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65026969" y3="0.43871276" z3="-0.34650035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72921293" y3="1.23705543" z3="-2.26230012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38984979" y3="0.43652649" z3="-1.1838713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72849606" y3="0.84597413" z3="-3.66027631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63354674" y3="1.74913532" z3="-3.13388546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37930392" y3="2.59067885" z3="-4.61201252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.560139" y3="1.24933199" z3="-4.37230406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49970016" y3="2.92559439" z3="-5.17053582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92523707" y3="-0.48417269" z3="-3.43897103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09951495" y3="0.04793126" z3="-0.99944946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40195258" y3="-1.09636718" z3="-1.99799654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93045016" y3="-0.96561574" z3="-1.82450378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10435568" y3="-2.42059611" z3="-1.84277326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14319671" y3="-3.6157293" z3="0.67522293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00697784" y3="-5.24984769" z3="-4.7424609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23698468" y3="-4.99395788" z3="-3.70466851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83874182" y3="-4.30760612" z3="-1.08515678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78614063" y3="-4.58472388" z3="-2.85124158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55325244" y3="-5.08657953" z3="-3.24819672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8550212" y3="-4.73802209" z3="-1.93411937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4972375" y3="-4.25637098" z3="-1.52516683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81911107" y3="-4.50167604" z3="-3.19685507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35065861" y3="-5.40140587" z3="-3.92468478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89172278" y3="-4.77887429" z3="-1.59196644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03059693" y3="-3.86056463" z3="0.23578117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17197835" y3="-3.64883433" z3="0.8792527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05869429" y3="-4.11178352" z3="0.44399432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16905857" y3="-3.51431557" z3="2.34631841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23107572" y3="-3.3298522" z3="5.14417865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36615649" y3="-3.71971425" z3="3.04788705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00291615" y3="-3.22282047" z3="3.06979617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03120758" y3="-3.13107147" z3="4.4583583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39623428" y3="-3.62970736" z3="4.4367407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2804484" y3="-3.95968682" z3="2.4982151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04276661" y3="-3.08861174" z3="2.56676539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10253724" y3="-2.92416566" z3="4.99802337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33504191" y3="-3.80112773" z3="4.97045371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25282959" y3="-3.26618374" z3="6.23570061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41560768" y3="-3.89051876" z3="-0.62003322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17525415" y3="-3.38719171" z3="-1.07203259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52052045" y3="0.24344615" z3="-4.70989183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08050297" y3="-1.72222421" z3="0.02172184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90672946" y3="-0.97207966" z3="1.18396466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84574584" y3="-0.32157391" z3="1.5192817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36997153" y3="0.55138944" z3="1.22374905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4485915" y3="1.45533311" z3="-0.40016915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98190626" y3="-0.70518119" z3="1.39848461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35563258" y3="1.73920222" z3="2.67223057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88284489" y3="-0.96298041" z3="2.08052969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65623923" y3="-0.34926194" z3="3.33949661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20809224" y3="0.76745055" z3="-1.22893805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32365198" y3="2.24720882" z3="-0.39328176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42964132" y3="1.93694033" z3="-0.56007483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01152591" y3="-1.07123148" z3="2.4381216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95451873" y3="-0.24185432" z3="1.1600668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85661606" y3="-1.54588173" z3="0.69702381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41196301" y3="1.1966315" z3="3.63260955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58132321" y3="2.32547484" z3="2.67185505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19685749" y3="2.45344206" z3="2.62541931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7947708" y3="-0.80536464" z3="3.85304443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57188821" y3="-0.52364463" z3="3.92004209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48570033" y3="0.73312225" z3="3.21960445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84317286" y3="-0.70344274" z3="0.9906301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41976837" y3="-2.03157135" z3="0.85464653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76597483" y3="-2.67571295" z3="1.89775109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55257477" y3="-1.97885869" z3="3.08341273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02865733" y3="-0.68542691" z3="3.27622431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68226249" y3="-0.0547512" z3="2.2222698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5280549" y3="-2.53214598" z3="-0.10894431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3716191" y3="-3.68528674" z3="1.77625322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68833422" y3="-2.57637705" z3="4.10640762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84287839" y3="-0.17277377" z3="4.2205732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02338077" y3="0.97801529" z3="2.33574604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79645246" y3="0.46302219" z3="-4.28456478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77593958" y3="-0.50507781" z3="-4.46285156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42783381" y3="-1.69629126" z3="-5.08900843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14157279" y3="-1.92623229" z3="-5.56700649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83082862" y3="-0.95503662" z3="-5.36677372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04149609" y3="1.38594311" z3="-3.75269948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79456877" y3="-0.35976467" z3="-4.10233881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43925662" y3="-2.74600077" z3="-5.22949389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08895477" y3="-2.86612323" z3="-6.06885193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85253596" y3="-1.14011273" z3="-5.70227577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35574501" y3="-1.8802896" z3="5.04573664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31271603" y3="-3.71815062" z3="3.93964989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21681982" y3="-3.64589507" z3="-6.01087399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44011015" y3="-2.66293872" z3="-4.54561838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07394804" y3="1.15869822" z3="-1.4967153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11214026" y3="1.55018725" z3="-2.47314374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4433631" y3="1.48379034" z3="-1.69810365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85272173" y3="2.14774531" z3="-2.82860751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17060275" y3="1.18366472" z3="-0.93735084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90949432" y3="2.38585914" z3="-2.9757406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57143253" y3="2.21822656" z3="-3.64230566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90377175" y3="2.50849301" z3="-3.81511758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84909777" y3="2.49249164" z3="-4.41466568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23446637" y3="3.01542364" z3="-4.72586526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4022627" y3="3.15260892" z3="-3.33129807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28553396" y3="3.56450268" z3="-4.11687374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21075983" y3="4.16358784" z3="-2.73908439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95845544" y3="5.49660019" z3="-2.96140255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0407228" y3="3.87492448" z3="-2.09221607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59572278" y3="6.25230528" z3="-2.49366626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05931812" y3="4.95037502" z3="-4.34127511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88002534" y3="5.89959088" z3="-3.78424683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20650131" y3="5.24783575" z3="-4.95934124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6945219" y3="6.96290955" z3="-3.96050526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47823882" y3="-2.19968974" z3="-0.29961776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.447481" y3="-2.99164193" z3="-1.06710815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00837348" y3="-2.58236559" z3="0.58730742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09208781" y3="-1.37947569" z3="-0.71786011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17543186" y3="-1.42470788" z3="-1.14720991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31169514" y3="-0.3838419" z3="-1.4940413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09905639" y3="-1.55031773" z3="-0.94134277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41503869" y3="-2.07803937" z3="-1.99946376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.0514,-.1935;7.3908,.1632,.4107;6.6503,.4387,-.3465;4.7292,1.2371,-2.2623;4.3898,.4365,-1.1839;2.7285,.846,-3.6603;3.6335,1.7491,-3.1339;1.3793,2.5907,-4.612;1.5601,1.2493,-4.3723;.4997,2.9256,-5.1705;2.9252,-.4842,-3.439;3.0995,.0479,-.9994;2.402,-1.0964,-1.998;.9305,-.9656,-1.8245;3.1044,-2.4206,-1.8428;-.1432,-3.6157,.6752;-.007,-5.2498,-4.7425;-.237,-4.994,-3.7047;-.8387,-4.3076,-1.0852;.7861,-4.5847,-2.8512;-1.5533,-5.0866,-3.2482;-1.855,-4.738,-1.9341;.4972,-4.2564,-1.5252;1.8191,-4.5017,-3.1969;-2.3507,-5.4014,-3.9247;-2.8917,-4.7789,-1.592;-1.0306,-3.8606,.2358;-2.172,-3.6488,.8793;-3.0587,-4.1118,.444;-2.1691,-3.5143,2.3463;-2.2311,-3.3299,5.1442;-3.3662,-3.7197,3.0479;-1.0029,-3.2228,3.0698;-1.0312,-3.1311,4.4584;-3.3962,-3.6297,4.4367;-4.2804,-3.9597,2.4982;-.0428,-3.0886,2.5668;-.1025,-2.9242,4.998;-4.335,-3.8011,4.9705;-2.2528,-3.2662,6.2357;1.4156,-3.8905,-.62;2.1753,-3.3872,-1.072;.5205,.2434,-4.7099;-3.0805,-1.7222,.0217;-2.9067,-.9721,1.184;-1.8457,-.3216,1.5193;-.37,.5514,1.2237;-.4486,1.4553,-.4002;.9819,-.7052,1.3985;-.3556,1.7392,2.6722;-3.8828,-.963,2.0805;-3.6562,-.3493,3.3395;-.2081,.7675,-1.2289;.3237,2.2472,-.3933;-1.4296,1.9369,-.5601;1.0115,-1.0712,2.4381;1.9545,-.2419,1.1601;.8566,-1.5459,.697;-.412,1.1966,3.6326;.5813,2.3255,2.6719;-1.1969,2.4534,2.6254;-2.7948,-.8054,3.853;-4.5719,-.5236,3.92;-3.4857,.7331,3.2196;4.8432,-.7034,.9906;4.4198,-2.0316,.8546;3.766,-2.6757,1.8978;3.5526,-1.9789,3.0834;4.0287,-.6854,3.2762;4.6823,-.0548,2.2223;4.5281,-2.5321,-.1089;3.3716,-3.6853,1.7763;2.6883,-2.5764,4.1064;3.8429,-.1728,4.2206;5.0234,.978,2.3357;-.7965,.463,-4.2846;-1.7759,-.5051,-4.4629;-1.4278,-1.6963,-5.089;-.1416,-1.9262,-5.567;.8308,-.955,-5.3668;-1.0415,1.3859,-3.7527;-2.7946,-.3598,-4.1023;-2.4393,-2.746,-5.2295;.089,-2.8661,-6.0689;1.8525,-1.1401,-5.7023;2.3557,-1.8803,5.0457;2.3127,-3.7182,3.9396;-2.2168,-3.6459,-6.0109;-3.4401,-2.6629,-4.5456;7.0739,1.1587,-1.4967;6.1121,1.5502,-2.4731;8.4434,1.4838,-1.6981;8.8527,2.1477,-2.8286;9.1706,1.1837,-.9374;9.9095,2.3859,-2.9757;6.5714,2.2182,-3.6423;7.9038,2.5085,-3.8151;5.8491,2.4925,-4.4147;8.2345,3.0154,-4.7259;3.4023,3.1526,-3.3313;2.2855,3.5645,-4.1169;4.2108,4.1636,-2.7391;3.9585,5.4966,-2.9614;5.0407,3.8749,-2.0922;4.5957,6.2523,-2.4937;2.0593,4.9504,-4.3413;2.88,5.8996,-3.7842;1.2065,5.2478,-4.9593;2.6945,6.9629,-3.9605;-4.4782,-2.1997,-.2996;-4.4475,-2.9916,-1.0671;-5.0084,-2.5824,.5873;-5.0921,-1.3795,-.7179;-2.1754,-1.4247,-1.1472;-2.3117,-.3838,-1.494;-1.0991,-1.5503,-.9413;-2.415,-2.078,-1.9995;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650426942926</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000884325838 0.000108484691 0.022789785277 0.005383436071</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690773 -0.000018957 0.000024143 0.000149119 0.000190441 0.000372066 0.000422322 0.000568207 0.000646261 0.000802543 0.000893353 0.001031009 0.001224885 0.001328534 0.001365693 0.001401519 0.001554840 0.001656113 0.001789655 0.001888824 0.002171996 0.002319453 0.002459456 0.002577082 0.002676264 0.003009747 0.003069137 0.003405222 0.003516456 0.003886425 0.004449536 0.004631705 0.004727325 0.005087552 0.006031133 0.006088922 0.006251265 0.006648033 0.006936552 0.007715995 0.008118273 0.008199611 0.008458876 0.009347831 0.009967094 0.010170620 0.010641474 0.011103533 0.011874019 0.012146302 0.012909016 0.013045761 0.014144444 0.014593796 0.015299400 0.015523529 0.015876022 0.016396059 0.016790427 0.017487982 0.018129828 0.018560038 0.019441705 0.019573619 0.020097027 0.020704631 0.021231053 0.021382480 0.022460676 0.023137334 0.024252390 0.026360475 0.026794895 0.027651471 0.027824679 0.029529287 0.030323849 0.031611300 0.033292287 0.033655935 0.034103052 0.035807646 0.037033298 0.037539489 0.039563256 0.040056999 0.040832625 0.041190952 0.042445331 0.044674242 0.045421106 0.047118949 0.047973939 0.049264701 0.050463603 0.051015000 0.051235805 0.051575561 0.052486470 0.052694810 0.052926717 0.053112708 0.054731702 0.054948234 0.056040175 0.056275153 0.056545944 0.056713802 0.057223322 0.059124087 0.060558774 0.060992394 0.061720241 0.062374696 0.063322251 0.064519980 0.065330099 0.065983062 0.066544326 0.068359286 0.069073227 0.070281782 0.072745564 0.074377057 0.074790080 0.076511275 0.078512410 0.084106127 0.086694355 0.087132953 0.087616844 0.089236004 0.090565402 0.091440728 0.094027677 0.094804534 0.095782042 0.096426495 0.097852043 0.098831830 0.099344422 0.100196687 0.100923018 0.102479808 0.103210914 0.103605938 0.104372761 0.104576486 0.106347305 0.106984801 0.108161736 0.109782943 0.111019322 0.112384484 0.113252472 0.115030930 0.116206482 0.116821704 0.118705629 0.120795683 0.122298733 0.123170916 0.124594440 0.126180577 0.126281794 0.126644365 0.127233242 0.132049731 0.135083165 0.135812815 0.142809017 0.143786075 0.147078500 0.147556379 0.149754201 0.152287942 0.154668895 0.155297771 0.156632729 0.161491824 0.161903295 0.173762196 0.174259979 0.181279504 0.184861296 0.186396721 0.189613248 0.190399905 0.194149692 0.195371676 0.198682360 0.200292908 0.205243048 0.206999476 0.207375797 0.210232142 0.216362281 0.216755602 0.217958255 0.219192130 0.220827003 0.225277194 0.226700191 0.232259946 0.235122732 0.235705086 0.235994491 0.244684426 0.256079154 0.257264371 0.263881725 0.269954479 0.280668688 0.283331765 0.286333716 0.291902888 0.296902640 0.304403796 0.305796642 0.307320470 0.314414000 0.316752808 0.317400115 0.322232250 0.330099649 0.332850774 0.351828490 0.352598677 0.355088378 0.355848992 0.360075323 0.363030050 0.364254456 0.384184119 0.386044358 0.392184039 0.410579568 0.425933493 0.430970512 0.462417228 0.469126946 0.478612850 0.484126228 0.484481357 0.487587453 0.491467907 0.509637252 0.515604808 0.535441368 0.569295590 0.575123818 0.591783514 0.594071425 0.607295700 0.608384529 0.644702188 0.647572130 0.649702928 0.674346538 0.678402901 0.686073932 0.692009280 0.693621718 0.700033069 0.704555783 0.718148614 0.742257225 0.751376009 0.759436779 0.769791284 0.773218165 0.779579884 0.810999493 0.815726427 0.819914155 0.822840116 0.823590818 0.831731268 0.834972955 0.837842502 0.842480543 0.845858165 0.847549700 0.849852057 0.859288891 0.865941450 0.867261443 0.874230582 0.885981689 0.886297196 0.889711605 0.899959688 0.901086245 0.904124655 0.923803137 0.927978225 0.936482224 0.937737619 0.966204599 0.976365735 0.986658520 1.001707261 1.020217018 1.028380158 1.042069755 1.051010867 1.057669206 1.068856432 1.086886654 1.088772823 1.104719886 1.108056544 1.112525158 1.126077144 1.135984291 1.140293292 1.144678713 1.176371231 1.179048082 1.181749399 1.187016087 1.191595206 1.197366372 1.224685742 1.228356009 1.274205773 1.302713455 1.321343210 1.328386906 1.333180272 1.336483041 1.338133123 1.342435261 1.343308018 1.345029028 1.359286612 1.379268336 1.383014384 1.385662414 1.410983504 1.420443535 1.432200988 1.551493520 1.684389225 1.776131191</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">266</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34141149" y3="0.05214003" z3="-0.19134062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38854294" y3="0.16513929" z3="0.41534393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64912631" y3="0.43964656" z3="-0.34320807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73030391" y3="1.23399537" z3="-2.26300285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38960872" y3="0.43567973" z3="-1.18349615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72917057" y3="0.84332141" z3="-3.66043722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63563627" y3="1.7456571" z3="-3.13607042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38193551" y3="2.5881294" z3="-4.61455112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56090144" y3="1.24751765" z3="-4.37189355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50237827" y3="2.92352281" z3="-5.1728591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92439897" y3="-0.48672115" z3="-3.43799231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09903483" y3="0.04841797" z3="-0.99952116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40219198" y3="-1.09767571" z3="-1.99622539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93060396" y3="-0.96818746" z3="-1.82252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10617525" y3="-2.42095705" z3="-1.83967364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14195525" y3="-3.61374699" z3="0.67177448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00381997" y3="-5.24457965" z3="-4.74636043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23453137" y3="-4.98867712" z3="-3.70872514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83804185" y3="-4.30240188" z3="-1.08957124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78845984" y3="-4.58296934" z3="-2.85357385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55184426" y3="-5.07756082" z3="-3.25422591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85445365" y3="-4.72900624" z3="-1.9403387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49869316" y3="-4.25472693" z3="-1.52760961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82207483" y3="-4.50256225" z3="-3.19754419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34962307" y3="-5.38936191" z3="-3.93202881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89199654" y3="-4.76654386" z3="-1.59973446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02990711" y3="-3.85686306" z3="0.23180365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17102077" y3="-3.64866196" z3="0.87669305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0574644" y3="-4.11172288" z3="0.44077254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16709215" y3="-3.51857242" z3="2.34414767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22681463" y3="-3.3460859" z3="5.14275131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36282095" y3="-3.73064095" z3="3.04602746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00106509" y3="-3.22605166" z3="3.06760369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02832081" y3="-3.14014392" z3="4.45656464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39167736" y3="-3.64677812" z3="4.43530729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27671862" y3="-3.97159875" z3="2.49625806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04169693" y3="-3.08650716" z3="2.56393024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10035216" y3="-2.93152169" z3="4.99631109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32921303" y3="-3.82391751" z3="4.9692911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24757033" y3="-3.28721307" z3="6.23455621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41718134" y3="-3.89271185" z3="-0.62073603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17769704" y3="-3.38900388" z3="-1.07105106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51988714" y3="0.242444" z3="-4.70863145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08379389" y3="-1.72111723" z3="0.02472077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90658042" y3="-0.97371502" z3="1.18812685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84482275" y3="-0.32321681" z3="1.52119647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37261276" y3="0.5539472" z3="1.22187483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45418667" y3="1.45327395" z3="-0.40448088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9815501" y3="-0.69972102" z3="1.39976285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36083568" y3="1.74700628" z3="2.66627787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87942008" y3="-0.96775761" z3="2.08831211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64779369" y3="-0.35946629" z3="3.34903162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21137472" y3="0.76452147" z3="-1.23166997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31587453" y3="2.24748925" z3="-0.39929197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43651632" y3="1.93138537" z3="-0.5655732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01163017" y3="-1.06294978" z3="2.44038682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9535573" y3="-0.23618289" z3="1.15993103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85690936" y3="-1.54243405" z3="0.70052659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41264913" y3="1.20807592" z3="3.62881127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57326113" y3="2.33791667" z3="2.66189513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20566969" y3="2.45692926" z3="2.61822932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78578625" y3="-0.81942906" z3="3.85810763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56204675" y3="-0.53434335" z3="3.93161766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47529466" y3="0.72304385" z3="3.23309716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84095509" y3="-0.70026339" z3="0.99399622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41828479" y3="-2.02886149" z3="0.86071804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76475855" y3="-2.67120378" z3="1.90506646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54995762" y3="-1.9716367" z3="3.08875395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02480749" y3="-0.67728219" z3="3.27888267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67882233" y3="-0.04875126" z3="2.22395335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52565119" y3="-2.53098987" z3="-0.10292907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37067163" y3="-3.68143631" z3="1.78534388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68613964" y3="-2.56779132" z3="4.11280957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83768186" y3="-0.16230283" z3="4.22160916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01890587" y3="0.98444378" z3="2.3349605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79681868" y3="0.46502611" z3="-4.28413483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77844692" y3="-0.50050256" z3="-4.46310912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43283734" y3="-1.6925419" z3="-5.08878469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14664441" y3="-1.92588495" z3="-5.56599012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82798105" y3="-0.95710248" z3="-5.36508845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03986474" y3="1.38858943" z3="-3.75235927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79709863" y3="-0.35274133" z3="-4.10331496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44731755" y3="-2.7391245" z3="-5.23085233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08172847" y3="-2.86640755" z3="-6.06715325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84952959" y3="-1.14462347" z3="-5.69991471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3448607" y3="-1.86663799" z3="5.04602312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32047022" y3="-3.71373062" z3="3.95380529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22405751" y3="-3.64329216" z3="-6.0072695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45181457" y3="-2.64908027" z3="-4.55291809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07426452" y3="1.15788458" z3="-1.49392628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11376003" y3="1.54748411" z3="-2.47234859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44375426" y3="1.48286811" z3="-1.69377078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85447761" y3="2.14494593" z3="-2.82463016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16996217" y3="1.18427724" z3="-0.9314255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91164178" y3="2.38432934" z3="-2.97024685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57474275" y3="2.21435734" z3="-3.64169396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90701899" y3="2.50426896" z3="-3.81300249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8535309" y3="2.48737608" z3="-4.41550042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23899261" y3="3.01119124" z3="-4.72374183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40563728" y3="3.14951557" z3="-3.33517763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28960967" y3="3.56158301" z3="-4.12157962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21472864" y3="4.16120776" z3="-2.74399582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96510139" y3="5.49373142" z3="-2.97001053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04424254" y3="3.87267856" z3="-2.09648965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60335075" y3="6.2496964" z3="-2.50356851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06534445" y3="4.94754343" z3="-4.34884397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88753767" y3="5.89666903" z3="-3.7940128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21316251" y3="5.24483953" z3="-4.96787432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70411369" y3="6.95974699" z3="-3.97307606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48225157" y3="-2.19902239" z3="-0.29282398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45386532" y3="-2.99025542" z3="-1.06141512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00922778" y3="-2.58285118" z3="0.59557833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09795869" y3="-1.37867572" z3="-0.70812826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18222656" y3="-1.4213912" z3="-1.14623539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32167099" y3="-0.38048838" z3="-1.492442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1053768" y3="-1.54488699" z3="-0.9426307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42285145" y3="-2.07502157" z3="-1.99823406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3414,.0521,-.1913;7.3885,.1651,.4153;6.6491,.4396,-.3432;4.7303,1.234,-2.263;4.3896,.4357,-1.1835;2.7292,.8433,-3.6604;3.6356,1.7457,-3.1361;1.3819,2.5881,-4.6146;1.5609,1.2475,-4.3719;.5024,2.9235,-5.1729;2.9244,-.4867,-3.438;3.099,.0484,-.9995;2.4022,-1.0977,-1.9962;.9306,-.9682,-1.8225;3.1062,-2.421,-1.8397;-.142,-3.6137,.6718;-.0038,-5.2446,-4.7464;-.2345,-4.9887,-3.7087;-.838,-4.3024,-1.0896;.7885,-4.583,-2.8536;-1.5518,-5.0776,-3.2542;-1.8545,-4.729,-1.9403;.4987,-4.2547,-1.5276;1.8221,-4.5026,-3.1975;-2.3496,-5.3894,-3.932;-2.892,-4.7665,-1.5997;-1.0299,-3.8569,.2318;-2.171,-3.6487,.8767;-3.0575,-4.1117,.4408;-2.1671,-3.5186,2.3441;-2.2268,-3.3461,5.1428;-3.3628,-3.7306,3.046;-1.0011,-3.2261,3.0676;-1.0283,-3.1401,4.4566;-3.3917,-3.6468,4.4353;-4.2767,-3.9716,2.4963;-.0417,-3.0865,2.5639;-.1004,-2.9315,4.9963;-4.3292,-3.8239,4.9693;-2.2476,-3.2872,6.2346;1.4172,-3.8927,-.6207;2.1777,-3.389,-1.0711;.5199,.2424,-4.7086;-3.0838,-1.7211,.0247;-2.9066,-.9737,1.1881;-1.8448,-.3232,1.5212;-.3726,.5539,1.2219;-.4542,1.4533,-.4045;.9816,-.6997,1.3998;-.3608,1.747,2.6663;-3.8794,-.9678,2.0883;-3.6478,-.3595,3.349;-.2114,.7645,-1.2317;.3159,2.2475,-.3993;-1.4365,1.9314,-.5656;1.0116,-1.0629,2.4404;1.9536,-.2362,1.1599;.8569,-1.5424,.7005;-.4126,1.2081,3.6288;.5733,2.3379,2.6619;-1.2057,2.4569,2.6182;-2.7858,-.8194,3.8581;-4.562,-.5343,3.9316;-3.4753,.723,3.2331;4.841,-.7003,.994;4.4183,-2.0289,.8607;3.7648,-2.6712,1.9051;3.55,-1.9716,3.0888;4.0248,-.6773,3.2789;4.6788,-.0488,2.224;4.5257,-2.531,-.1029;3.3707,-3.6814,1.7853;2.6861,-2.5678,4.1128;3.8377,-.1623,4.2216;5.0189,.9844,2.335;-.7968,.465,-4.2841;-1.7784,-.5005,-4.4631;-1.4328,-1.6925,-5.0888;-.1466,-1.9259,-5.566;.828,-.9571,-5.3651;-1.0399,1.3886,-3.7524;-2.7971,-.3527,-4.1033;-2.4473,-2.7391,-5.2309;.0817,-2.8664,-6.0672;1.8495,-1.1446,-5.6999;2.3449,-1.8666,5.046;2.3205,-3.7137,3.9538;-2.2241,-3.6433,-6.0073;-3.4518,-2.6491,-4.5529;7.0743,1.1579,-1.4939;6.1138,1.5475,-2.4723;8.4438,1.4829,-1.6938;8.8545,2.1449,-2.8246;9.17,1.1843,-.9314;9.9116,2.3843,-2.9702;6.5747,2.2144,-3.6417;7.907,2.5043,-3.813;5.8535,2.4874,-4.4155;8.239,3.0112,-4.7237;3.4056,3.1495,-3.3352;2.2896,3.5616,-4.1216;4.2147,4.1612,-2.744;3.9651,5.4937,-2.97;5.0442,3.8727,-2.0965;4.6034,6.2497,-2.5036;2.0653,4.9475,-4.3488;2.8875,5.8967,-3.794;1.2132,5.2448,-4.9679;2.7041,6.9597,-3.9731;-4.4823,-2.199,-.2928;-4.4539,-2.9903,-1.0614;-5.0092,-2.5829,.5956;-5.098,-1.3787,-.7081;-2.1822,-1.4214,-1.1462;-2.3217,-.3805,-1.4924;-1.1054,-1.5449,-.9426;-2.4229,-2.075,-1.9982;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423910320</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001154879492 0.000161308641 0.017647556261 0.005326382480</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690995 -0.000202269 0.000002403 0.000161715 0.000196359 0.000374228 0.000416085 0.000572909 0.000764282 0.000858693 0.000955655 0.001032340 0.001226201 0.001328753 0.001367251 0.001418055 0.001555280 0.001675362 0.001792594 0.001889702 0.002173036 0.002318499 0.002465743 0.002578402 0.002676553 0.003010021 0.003069374 0.003405522 0.003518052 0.003889510 0.004449333 0.004632413 0.004727820 0.005087439 0.006031962 0.006088960 0.006254518 0.006647471 0.006936520 0.007714462 0.008118540 0.008198369 0.008448512 0.009348347 0.009964960 0.010168896 0.010639939 0.011104208 0.011871902 0.012146804 0.012906256 0.013046294 0.014145102 0.014594041 0.015299640 0.015524086 0.015876091 0.016401061 0.016783220 0.017489338 0.018130025 0.018562947 0.019438982 0.019572197 0.020097565 0.020704342 0.021231140 0.021381159 0.022457166 0.023136927 0.024245979 0.026366115 0.026794929 0.027651541 0.027827205 0.029530169 0.030324254 0.031610175 0.033293208 0.033655979 0.034103808 0.035806886 0.037034096 0.037533171 0.039562287 0.040058797 0.040825404 0.041162343 0.042451546 0.044672834 0.045421235 0.047118926 0.047976103 0.049266053 0.050466260 0.051015504 0.051236015 0.051577456 0.052486479 0.052695853 0.052926759 0.053112716 0.054732254 0.054948311 0.056040740 0.056275146 0.056546404 0.056714166 0.057223383 0.059126892 0.060558877 0.060994641 0.061720565 0.062375457 0.063322243 0.064519670 0.065330023 0.065985119 0.066544861 0.068360015 0.069073605 0.070281799 0.072745920 0.074376654 0.074789938 0.076513504 0.078514642 0.084113478 0.086702057 0.087135826 0.087617804 0.089240575 0.090566345 0.091447098 0.094030093 0.094814059 0.095786889 0.096426708 0.097852042 0.098832372 0.099350699 0.100197474 0.100927306 0.102479962 0.103211945 0.103607756 0.104373081 0.104577732 0.106348529 0.106984773 0.108164050 0.109783229 0.111021350 0.112390287 0.113274050 0.115033686 0.116207150 0.116821828 0.118705846 0.120798065 0.122299775 0.123174533 0.124593830 0.126183434 0.126283624 0.126649288 0.127236910 0.132050131 0.135083468 0.135813305 0.142809080 0.143789107 0.147078507 0.147556170 0.149754300 0.152278825 0.154668753 0.155305382 0.156632902 0.161495019 0.161903029 0.173764159 0.174261202 0.181294547 0.184866047 0.186400007 0.189613270 0.190401367 0.194150755 0.195378060 0.198684731 0.200294462 0.205243955 0.207003477 0.207376891 0.210232623 0.216368888 0.216756958 0.217958452 0.219194576 0.220829911 0.225277185 0.226701186 0.232263866 0.235122551 0.235705238 0.235995124 0.244684658 0.256080385 0.257264489 0.263881602 0.269955433 0.280676813 0.283332861 0.286333727 0.291906893 0.296911587 0.304404268 0.305797315 0.307320389 0.314414691 0.316752934 0.317400850 0.322232456 0.330099213 0.332851773 0.351828396 0.352610198 0.355089126 0.355849162 0.360075129 0.363032230 0.364256958 0.384185221 0.386044894 0.392185274 0.410580077 0.425937731 0.430971465 0.462419218 0.469129442 0.478614600 0.484144782 0.484483857 0.487586381 0.491468382 0.509637775 0.515603993 0.535441054 0.569293237 0.575135587 0.591789233 0.594072307 0.607297553 0.608388191 0.644702465 0.647574311 0.649703385 0.674346527 0.678407155 0.686078181 0.692011235 0.693623440 0.700033047 0.704561406 0.718160587 0.742263112 0.751379880 0.759438241 0.769798039 0.773221862 0.779581541 0.811000350 0.815726466 0.819917753 0.822848533 0.823590850 0.831734026 0.834972950 0.837842751 0.842484510 0.845858963 0.847549968 0.849853327 0.859290404 0.865941774 0.867265198 0.874234916 0.885986228 0.886301657 0.889711726 0.899960864 0.901086941 0.904124580 0.923803644 0.927979392 0.936483542 0.937748228 0.966204786 0.976371568 0.986672803 1.001707893 1.020225527 1.028381937 1.042070713 1.051016514 1.057669323 1.068856481 1.086889299 1.088773164 1.104721667 1.108066257 1.112526464 1.126086017 1.135984904 1.140331407 1.144680293 1.176376578 1.179048897 1.181758811 1.187018321 1.191595830 1.197406909 1.224688386 1.228356075 1.274226954 1.302719797 1.321345651 1.328389396 1.333185546 1.336486324 1.338137071 1.342439388 1.343310337 1.345028999 1.359287995 1.379277060 1.383014698 1.385672663 1.411016730 1.420444391 1.432208776 1.551493546 1.684451201 1.776136285</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">267</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33821876" y3="0.05266719" z3="-0.18754185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38357142" y3="0.17201465" z3="0.42349868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64478388" y3="0.44351727" z3="-0.33687934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72767738" y3="1.23319279" z3="-2.26025038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38708682" y3="0.43374998" z3="-1.18132446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72779218" y3="0.84059568" z3="-3.66026394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63328175" y3="1.74385876" z3="-3.13430898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38287223" y3="2.58490468" z3="-4.61863919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56063443" y3="1.24393068" z3="-4.37436307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50461249" y3="2.91969318" z3="-5.17935309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92323185" y3="-0.48949275" z3="-3.43810241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09687797" y3="0.04356834" z3="-0.99884921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40173486" y3="-1.10249533" z3="-1.99691215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92996752" y3="-0.97552883" z3="-1.82229989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1074545" y3="-2.42505951" z3="-1.84224063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14070629" y3="-3.60628091" z3="0.66385307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00147811" y3="-5.25992302" z3="-4.7469057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23293567" y3="-4.99833519" z3="-3.71074554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83739886" y3="-4.29954106" z3="-1.09507156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.79041487" y3="-4.59320233" z3="-2.85582021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55099737" y3="-5.08016578" z3="-3.25770079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85426124" y3="-4.72477446" z3="-1.94567116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.50008479" y3="-4.25882346" z3="-1.53151362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82552016" y3="-4.5202098" z3="-3.19883559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34862049" y3="-5.39187782" z3="-3.93521421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89261086" y3="-4.75582207" z3="-1.60670913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02863757" y3="-3.85065174" z3="0.225282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16901359" y3="-3.64522475" z3="0.87201045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05507184" y3="-4.10915797" z3="0.43650767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16367819" y3="-3.51657452" z3="2.33951815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22127956" y3="-3.34726031" z3="5.13826765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35866994" y3="-3.73005486" z3="3.04224767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99731516" y3="-3.22419209" z3="3.06216598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02343613" y3="-3.14008493" z3="4.45125896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38665857" y3="-3.64752734" z3="4.43153356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27308226" y3="-3.97060299" z3="2.49297681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03893529" y3="-3.08296819" z3="2.55786135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09487634" y3="-2.93252193" z3="4.99077045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32401344" y3="-3.82523444" z3="4.96611832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24115853" y3="-3.28967512" z3="6.23010883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41867787" y3="-3.89795176" z3="-0.6245688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17930498" y3="-3.39441884" z3="-1.07485161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51817429" y3="0.24004512" z3="-4.70873236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08655504" y3="-1.71683873" z3="0.02475962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90515718" y3="-0.97034091" z3="1.18809635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84204544" y3="-0.32012605" z3="1.51728927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3707794" y3="0.55926905" z3="1.21937357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4474545" y3="1.45421029" z3="-0.40971795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98456183" y3="-0.69231584" z3="1.4034657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36555858" y3="1.75650493" z3="2.66020173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87461728" y3="-0.96497557" z3="2.09207139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63802284" y3="-0.35795513" z3="3.35257203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20835775" y3="0.7615234" z3="-1.23495372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32670112" y3="2.24412483" z3="-0.40658731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42718057" y3="1.93781949" z3="-0.57251304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01119773" y3="-1.05689871" z3="2.44398247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95699552" y3="-0.22742542" z3="1.16759297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86307557" y3="-1.53431405" z3="0.70280377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4187124" y3="1.22012152" z3="3.62429343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56653909" y3="2.35041239" z3="2.65676312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21248912" y3="2.4637691" z3="2.60750627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77281467" y3="-0.81716607" z3="3.85702083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54916316" y3="-0.5349635" z3="3.93948589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46781221" y3="0.72482492" z3="3.23709524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83814784" y3="-0.70237885" z3="0.99613379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41319686" y3="-2.02995178" z3="0.85920681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76148472" y3="-2.6750242" z3="1.90302013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55160437" y3="-1.979608" z3="3.09041078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02864643" y3="-0.68668436" z3="3.28369524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6803318" y3="-0.05511853" z3="2.22902751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52077109" y3="-2.52988169" z3="-0.10412439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36706131" y3="-3.68443813" z3="1.78156173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69058284" y3="-2.57869471" z3="4.11513658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84575828" y3="-0.17526236" z3="4.22958442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02289483" y3="0.9771993" z3="2.34339537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79792949" y3="0.46526676" z3="-4.28331573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78118641" y3="-0.49947008" z3="-4.46027412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43770853" y3="-1.69277045" z3="-5.08475428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15219944" y3="-1.92857738" z3="-5.56189263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82403861" y3="-0.96095579" z3="-5.36338231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03950886" y3="1.39019485" z3="-3.75347221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79917384" y3="-0.34944758" z3="-4.09987778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45334557" y3="-2.73827602" z3="-5.22430044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07468116" y3="-2.87022469" z3="-6.06233019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84504541" y3="-1.15061765" z3="-5.69847612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35645025" y3="-1.88254375" z3="5.05331846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31808235" y3="-3.72183547" z3="3.94991119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23652244" y3="-3.63728006" z3="-6.00821879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45176063" y3="-2.65312438" z3="-4.53717741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07009493" y3="1.16253252" z3="-1.48699096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11059065" y3="1.54862659" z3="-2.46776523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43901771" y3="1.49252172" z3="-1.68354649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8502232" y3="2.15547915" z3="-2.81384656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16433586" y3="1.19732233" z3="-0.91900139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90672555" y3="2.39848168" z3="-2.95690933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57204465" y3="2.21477904" z3="-3.63704591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90377651" y3="2.50952386" z3="-3.80522981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85167908" y3="2.48418294" z3="-4.41296659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2361144" y3="3.01493921" z3="-4.71592707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4043179" y3="3.14706501" z3="-3.33574364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29034534" y3="3.5585309" z3="-4.1253917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21272346" y3="4.15843324" z3="-2.74439465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96356652" y3="5.49120796" z3="-2.97196461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03980726" y3="3.87076949" z3="-2.09352614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60070228" y3="6.24737272" z3="-2.50452474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06771745" y3="4.94398631" z3="-4.35569664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88873376" y3="5.89347585" z3="-3.79981599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21757052" y3="5.24075264" z3="-4.97770764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70613963" y3="6.95645177" z3="-3.9806687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48577546" y3="-2.19551939" z3="-0.28817922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45908885" y3="-2.98546114" z3="-1.05769502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00898309" y3="-2.58101568" z3="0.6014891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10399439" y3="-1.37548422" z3="-0.70047724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18867711" y3="-1.4162699" z3="-1.14903966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32650796" y3="-0.37402149" z3="-1.49138259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11110471" y3="-1.54336603" z3="-0.94976026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43436514" y3="-2.06648977" z3="-2.00204853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3382,.0527,-.1875;7.3836,.172,.4235;6.6448,.4435,-.3369;4.7277,1.2332,-2.2603;4.3871,.4337,-1.1813;2.7278,.8406,-3.6603;3.6333,1.7439,-3.1343;1.3829,2.5849,-4.6186;1.5606,1.2439,-4.3744;.5046,2.9197,-5.1794;2.9232,-.4895,-3.4381;3.0969,.0436,-.9988;2.4017,-1.1025,-1.9969;.93,-.9755,-1.8223;3.1075,-2.4251,-1.8422;-.1407,-3.6063,.6639;-.0015,-5.2599,-4.7469;-.2329,-4.9983,-3.7107;-.8374,-4.2995,-1.0951;.7904,-4.5932,-2.8558;-1.551,-5.0802,-3.2577;-1.8543,-4.7248,-1.9457;.5001,-4.2588,-1.5315;1.8255,-4.5202,-3.1988;-2.3486,-5.3919,-3.9352;-2.8926,-4.7558,-1.6067;-1.0286,-3.8507,.2253;-2.169,-3.6452,.872;-3.0551,-4.1092,.4365;-2.1637,-3.5166,2.3395;-2.2213,-3.3473,5.1383;-3.3587,-3.7301,3.0422;-.9973,-3.2242,3.0622;-1.0234,-3.1401,4.4513;-3.3867,-3.6475,4.4315;-4.2731,-3.9706,2.493;-.0389,-3.083,2.5579;-.0949,-2.9325,4.9908;-4.324,-3.8252,4.9661;-2.2412,-3.2897,6.2301;1.4187,-3.898,-.6246;2.1793,-3.3944,-1.0749;.5182,.24,-4.7087;-3.0866,-1.7168,.0248;-2.9052,-.9703,1.1881;-1.842,-.3201,1.5173;-.3708,.5593,1.2194;-.4475,1.4542,-.4097;.9846,-.6923,1.4035;-.3656,1.7565,2.6602;-3.8746,-.965,2.0921;-3.638,-.358,3.3526;-.2084,.7615,-1.235;.3267,2.2441,-.4066;-1.4272,1.9378,-.5725;1.0112,-1.0569,2.444;1.957,-.2274,1.1676;.8631,-1.5343,.7028;-.4187,1.2201,3.6243;.5665,2.3504,2.6568;-1.2125,2.4638,2.6075;-2.7728,-.8172,3.857;-4.5492,-.535,3.9395;-3.4678,.7248,3.2371;4.8381,-.7024,.9961;4.4132,-2.03,.8592;3.7615,-2.675,1.903;3.5516,-1.9796,3.0904;4.0286,-.6867,3.2837;4.6803,-.0551,2.229;4.5208,-2.5299,-.1041;3.3671,-3.6844,1.7816;2.6906,-2.5787,4.1151;3.8458,-.1753,4.2296;5.0229,.9772,2.3434;-.7979,.4653,-4.2833;-1.7812,-.4995,-4.4603;-1.4377,-1.6928,-5.0848;-.1522,-1.9286,-5.5619;.824,-.961,-5.3634;-1.0395,1.3902,-3.7535;-2.7992,-.3494,-4.0999;-2.4533,-2.7383,-5.2243;.0747,-2.8702,-6.0623;1.845,-1.1506,-5.6985;2.3565,-1.8825,5.0533;2.3181,-3.7218,3.9499;-2.2365,-3.6373,-6.0082;-3.4518,-2.6531,-4.5372;7.0701,1.1625,-1.487;6.1106,1.5486,-2.4678;8.439,1.4925,-1.6835;8.8502,2.1555,-2.8138;9.1643,1.1973,-.919;9.9067,2.3985,-2.9569;6.572,2.2148,-3.637;7.9038,2.5095,-3.8052;5.8517,2.4842,-4.413;8.2361,3.0149,-4.7159;3.4043,3.1471,-3.3357;2.2903,3.5585,-4.1254;4.2127,4.1584,-2.7444;3.9636,5.4912,-2.972;5.0398,3.8708,-2.0935;4.6007,6.2474,-2.5045;2.0677,4.944,-4.3557;2.8887,5.8935,-3.7998;1.2176,5.2408,-4.9777;2.7061,6.9565,-3.9807;-4.4858,-2.1955,-.2882;-4.4591,-2.9855,-1.0577;-5.009,-2.581,.6015;-5.104,-1.3755,-.7005;-2.1887,-1.4163,-1.149;-2.3265,-.374,-1.4914;-1.1111,-1.5434,-.9498;-2.4344,-2.0665,-2.002;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421220109</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001615439312 0.000211664850 0.017195762369 0.005359502793</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690992 -0.000106762 0.000069987 0.000174989 0.000187830 0.000374209 0.000415898 0.000572941 0.000763642 0.000857220 0.001000069 0.001036131 0.001226348 0.001328734 0.001374233 0.001435048 0.001556070 0.001695168 0.001800001 0.001892525 0.002174662 0.002319272 0.002467358 0.002579503 0.002676759 0.003010645 0.003070011 0.003406986 0.003518066 0.003891137 0.004449358 0.004635765 0.004730062 0.005088008 0.006031523 0.006089020 0.006258473 0.006647852 0.006937657 0.007714801 0.008118967 0.008198359 0.008448172 0.009348673 0.009965164 0.010169139 0.010640774 0.011104332 0.011871900 0.012146775 0.012906262 0.013046492 0.014145041 0.014595007 0.015303841 0.015524142 0.015880767 0.016405744 0.016788406 0.017491647 0.018130389 0.018565386 0.019440518 0.019572247 0.020098039 0.020705143 0.021231604 0.021381880 0.022457987 0.023137089 0.024246118 0.026371741 0.026795116 0.027652423 0.027827409 0.029532608 0.030324542 0.031610242 0.033293521 0.033655916 0.034104466 0.035806683 0.037036081 0.037533755 0.039562459 0.040059159 0.040827785 0.041162104 0.042464245 0.044672785 0.045422309 0.047118948 0.047976480 0.049266872 0.050473483 0.051017474 0.051236027 0.051580113 0.052486591 0.052695874 0.052926804 0.053112949 0.054734221 0.054948268 0.056040945 0.056275192 0.056547095 0.056714335 0.057223468 0.059128863 0.060559481 0.060997721 0.061720513 0.062376017 0.063322455 0.064520571 0.065330843 0.065985858 0.066550029 0.068361638 0.069073843 0.070281928 0.072745993 0.074378012 0.074789957 0.076519145 0.078517190 0.084125472 0.086709541 0.087139166 0.087620145 0.089252998 0.090566375 0.091452028 0.094032953 0.094826938 0.095789133 0.096426703 0.097852039 0.098835292 0.099355162 0.100197558 0.100929583 0.102479943 0.103212431 0.103608206 0.104373269 0.104578570 0.106348888 0.106984777 0.108164894 0.109783274 0.111026278 0.112394731 0.113321201 0.115034230 0.116207255 0.116822075 0.118706765 0.120798071 0.122301927 0.123174872 0.124594141 0.126185438 0.126287593 0.126649551 0.127238436 0.132050128 0.135083307 0.135815769 0.142809146 0.143792946 0.147078536 0.147557205 0.149753896 0.152282816 0.154668713 0.155306840 0.156631813 0.161500319 0.161903152 0.173765294 0.174261193 0.181328607 0.184866071 0.186401890 0.189614587 0.190401350 0.194153714 0.195385344 0.198687040 0.200294438 0.205247222 0.207006972 0.207377500 0.210233144 0.216386554 0.216759249 0.217959060 0.219195195 0.220831122 0.225277175 0.226701436 0.232273026 0.235122507 0.235706008 0.235995097 0.244684961 0.256081422 0.257264777 0.263881560 0.269955423 0.280695309 0.283333449 0.286333753 0.291907889 0.296929151 0.304404641 0.305797538 0.307320487 0.314415131 0.316753523 0.317401711 0.322232439 0.330100618 0.332851782 0.351829704 0.352637436 0.355090762 0.355850995 0.360075763 0.363036553 0.364262374 0.384185787 0.386044838 0.392186640 0.410585137 0.425947658 0.430975608 0.462422538 0.469130894 0.478618693 0.484181367 0.484488364 0.487586794 0.491468731 0.509637931 0.515604242 0.535441573 0.569295654 0.575148597 0.591792398 0.594072276 0.607297623 0.608398810 0.644702457 0.647576729 0.649705237 0.674346527 0.678414346 0.686088019 0.692011844 0.693623308 0.700032902 0.704577668 0.718191940 0.742263506 0.751389997 0.759438500 0.769821337 0.773222593 0.779581549 0.811002199 0.815728286 0.819918317 0.822851166 0.823591748 0.831737516 0.834973167 0.837842835 0.842491785 0.845861777 0.847550581 0.849861428 0.859290450 0.865943279 0.867265203 0.874241954 0.885987968 0.886301726 0.889714111 0.899963053 0.901086965 0.904124728 0.923804371 0.927985459 0.936485815 0.937766104 0.966204873 0.976388799 0.986709007 1.001709045 1.020233474 1.028385515 1.042070891 1.051024356 1.057669364 1.068856490 1.086894821 1.088773680 1.104723458 1.108073335 1.112530531 1.126125328 1.135984924 1.140365741 1.144680578 1.176382876 1.179052465 1.181778220 1.187020049 1.191596749 1.197504924 1.224693188 1.228356030 1.274285305 1.302732727 1.321350981 1.328396509 1.333197923 1.336488118 1.338139746 1.342464389 1.343317326 1.345029877 1.359289853 1.379306349 1.383015326 1.385692296 1.411015285 1.420453377 1.432219443 1.551493516 1.684624124 1.776138067</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">268</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3367607" y3="0.04766293" z3="-0.18888544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38095667" y3="0.16953912" z3="0.42493216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64280859" y3="0.44205236" z3="-0.3355397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72646996" y3="1.23165129" z3="-2.25976107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38605629" y3="0.42947451" z3="-1.18292973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72796104" y3="0.83998215" z3="-3.66161426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6324264" y3="1.74264244" z3="-3.13411076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38134564" y3="2.5845159" z3="-4.6173538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56051035" y3="1.24382446" z3="-4.3747433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50272895" y3="2.91956425" z3="-5.17735936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92445004" y3="-0.49023193" z3="-3.44175495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09637015" y3="0.03799634" z3="-1.00209465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40151645" y3="-1.10603085" z3="-2.00242674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92976189" y3="-0.97854338" z3="-1.82856778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10617125" y3="-2.42935235" z3="-1.84961274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13925062" y3="-3.6103967" z3="0.66740858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01218527" y3="-5.25950375" z3="-4.74533456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24107252" y3="-4.99944722" z3="-3.70841357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83944073" y3="-4.30299458" z3="-1.09076982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7841207" y3="-4.59442815" z3="-2.85557758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55812875" y3="-5.08246854" z3="-3.25224623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85817755" y3="-4.72862311" z3="-1.93924935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49691029" y3="-4.26118328" z3="-1.53043737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81758971" y3="-4.51855989" z3="-3.20075578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35805109" y3="-5.39319116" z3="-3.92823864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89537433" y3="-4.76158551" z3="-1.59768204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02839018" y3="-3.85342037" z3="0.22965181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16810164" y3="-3.6442051" z3="0.87659855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05543677" y3="-4.10773786" z3="0.44285379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1618205" y3="-3.51210324" z3="2.3438588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21770145" y3="-3.33608819" z3="5.14230786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3569354" y3="-3.7213448" z3="3.04760242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99438021" y3="-3.22077426" z3="3.06541675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0196746" y3="-3.13341758" z3="4.45433719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38395597" y3="-3.63555993" z3="4.4367569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27196627" y3="-3.96152365" z3="2.49939155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03538406" y3="-3.08406254" z3="2.56029276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0905494" y3="-2.92697624" z3="4.99312421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32124032" y3="-3.81019717" z3="4.97213131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23681888" y3="-3.27603932" z3="6.23405536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41813483" y3="-3.89990027" z3="-0.62584117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17807313" y3="-3.39787023" z3="-1.07851846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51932483" y3="0.23890432" z3="-4.71140218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08303882" y3="-1.71754097" z3="0.02448353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90211231" y3="-0.96780342" z3="1.18581627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83954673" y3="-0.31624114" z3="1.51379078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36819542" y3="0.56156971" z3="1.21310348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44539227" y3="1.45183692" z3="-0.41819158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98639354" y3="-0.69002043" z3="1.40062564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36172473" y3="1.76340124" z3="2.65012193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87196537" y3="-0.96027167" z3="2.08914059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63635159" y3="-0.34969285" z3="3.34791468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20708651" y3="0.75739832" z3="-1.24183437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3300258" y3="2.24088027" z3="-0.41750486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42460562" y3="1.93564838" z3="-0.58142029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01230814" y3="-1.0521091" z3="2.44176622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95948359" y3="-0.22671958" z3="1.16399541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86501218" y3="-1.53361095" z3="0.70204183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4171457" y3="1.23091639" z3="3.61609671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57219517" y3="2.35461787" z3="2.64506302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20650124" y3="2.47278645" z3="2.59422491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77217034" y3="-0.80835273" z3="3.85463847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54844603" y3="-0.52433947" z3="3.93394525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46497007" y3="0.73299075" z3="3.22978301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8375657" y3="-0.71012473" z3="0.99340299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40964531" y3="-2.03635212" z3="0.8531757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75803753" y3="-2.6833635" z3="1.89574271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55130077" y3="-1.99124867" z3="3.08519654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03209962" y3="-0.70015006" z3="3.28214816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6834321" y3="-0.06656371" z3="2.22853938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51193194" y3="-2.53271904" z3="-0.11387636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3601562" y3="-3.69140248" z3="1.77090221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69126267" y3="-2.59182006" z3="4.10981992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85189341" y3="-0.19152176" z3="4.22977386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02779948" y3="0.9646095" z3="2.34527424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79737224" y3="0.46268293" z3="-4.28726516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77941584" y3="-0.50283644" z3="-4.46390776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43429686" y3="-1.69605669" z3="-5.08752459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14838236" y3="-1.93039747" z3="-5.56499872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82674787" y3="-0.96168063" z3="-5.36607479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04005961" y3="1.38732059" z3="-3.75711357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79795787" y3="-0.35401842" z3="-4.10431797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44879256" y3="-2.74290428" z3="-5.22736655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07953462" y3="-2.87184834" z3="-6.06463894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84800272" y3="-1.15026674" z3="-5.70100149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36345691" y3="-1.89859093" z3="5.05349372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31519229" y3="-3.73305518" z3="3.94126374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22921088" y3="-3.64381459" z3="-6.00856896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44934056" y3="-2.65651001" z3="-4.54335748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06822886" y3="1.16526753" z3="-1.48303854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10931167" y3="1.5516533" z3="-2.46419486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43651835" y3="1.49913863" z3="-1.67659516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84777497" y3="2.1664386" z3="-2.80429575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16133029" y3="1.2034897" z3="-0.91178979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90391507" y3="2.41304286" z3="-2.94488442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57119148" y3="2.22327069" z3="-3.63066431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90224706" y3="2.52160014" z3="-3.79599423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85153739" y3="2.49354308" z3="-4.40684433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23481059" y3="3.03213497" z3="-4.70447213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4011326" y3="3.14660784" z3="-3.33216469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28735313" y3="3.55824581" z3="-4.12200089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20673629" y3="4.15886114" z3="-2.73718532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95660083" y3="5.49129999" z3="-2.96340197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03382951" y3="3.87103115" z3="-2.08630076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59221196" y3="6.24755003" z3="-2.49391798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06281765" y3="4.94408722" z3="-4.3498176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88215295" y3="5.89370525" z3="-3.79172419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21273249" y3="5.2407907" z3="-4.97203543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69857474" y3="6.95666392" z3="-3.97126227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48261899" y3="-2.19596824" z3="-0.28758902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45699836" y3="-2.98856467" z3="-1.05505262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00672784" y3="-2.57848132" z3="0.60309428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09974567" y3="-1.37619693" z3="-0.70187679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18458233" y3="-1.42003587" z3="-1.14945501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3215415" y3="-0.37840501" z3="-1.49428388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10761101" y3="-1.54663872" z3="-0.94918734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43032626" y3="-2.07222534" z3="-2.00092461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3368,.0477,-.1889;7.381,.1695,.4249;6.6428,.4421,-.3355;4.7265,1.2317,-2.2598;4.3861,.4295,-1.1829;2.728,.84,-3.6616;3.6324,1.7426,-3.1341;1.3813,2.5845,-4.6174;1.5605,1.2438,-4.3747;.5027,2.9196,-5.1774;2.9245,-.4902,-3.4418;3.0964,.038,-1.0021;2.4015,-1.106,-2.0024;.9298,-.9785,-1.8286;3.1062,-2.4294,-1.8496;-.1393,-3.6104,.6674;-.0122,-5.2595,-4.7453;-.2411,-4.9994,-3.7084;-.8394,-4.303,-1.0908;.7841,-4.5944,-2.8556;-1.5581,-5.0825,-3.2522;-1.8582,-4.7286,-1.9392;.4969,-4.2612,-1.5304;1.8176,-4.5186,-3.2008;-2.3581,-5.3932,-3.9282;-2.8954,-4.7616,-1.5977;-1.0284,-3.8534,.2297;-2.1681,-3.6442,.8766;-3.0554,-4.1077,.4429;-2.1618,-3.5121,2.3439;-2.2177,-3.3361,5.1423;-3.3569,-3.7213,3.0476;-.9944,-3.2208,3.0654;-1.0197,-3.1334,4.4543;-3.384,-3.6356,4.4368;-4.272,-3.9615,2.4994;-.0354,-3.0841,2.5603;-.0905,-2.927,4.9931;-4.3212,-3.8102,4.9721;-2.2368,-3.276,6.2341;1.4181,-3.8999,-.6258;2.1781,-3.3979,-1.0785;.5193,.2389,-4.7114;-3.083,-1.7175,.0245;-2.9021,-.9678,1.1858;-1.8395,-.3162,1.5138;-.3682,.5616,1.2131;-.4454,1.4518,-.4182;.9864,-.69,1.4006;-.3617,1.7634,2.6501;-3.872,-.9603,2.0891;-3.6364,-.3497,3.3479;-.2071,.7574,-1.2418;.33,2.2409,-.4175;-1.4246,1.9356,-.5814;1.0123,-1.0521,2.4418;1.9595,-.2267,1.164;.865,-1.5336,.702;-.4171,1.2309,3.6161;.5722,2.3546,2.6451;-1.2065,2.4728,2.5942;-2.7722,-.8084,3.8546;-4.5484,-.5243,3.9339;-3.465,.733,3.2298;4.8376,-.7101,.9934;4.4096,-2.0364,.8532;3.758,-2.6834,1.8957;3.5513,-1.9912,3.0852;4.0321,-.7002,3.2821;4.6834,-.0666,2.2285;4.5119,-2.5327,-.1139;3.3602,-3.6914,1.7709;2.6913,-2.5918,4.1098;3.8519,-.1915,4.2298;5.0278,.9646,2.3453;-.7974,.4627,-4.2873;-1.7794,-.5028,-4.4639;-1.4343,-1.6961,-5.0875;-.1484,-1.9304,-5.565;.8267,-.9617,-5.3661;-1.0401,1.3873,-3.7571;-2.798,-.354,-4.1043;-2.4488,-2.7429,-5.2274;.0795,-2.8718,-6.0646;1.848,-1.1503,-5.701;2.3635,-1.8986,5.0535;2.3152,-3.7331,3.9413;-2.2292,-3.6438,-6.0086;-3.4493,-2.6565,-4.5434;7.0682,1.1653,-1.483;6.1093,1.5517,-2.4642;8.4365,1.4991,-1.6766;8.8478,2.1664,-2.8043;9.1613,1.2035,-.9118;9.9039,2.413,-2.9449;6.5712,2.2233,-3.6307;7.9022,2.5216,-3.796;5.8515,2.4935,-4.4068;8.2348,3.0321,-4.7045;3.4011,3.1466,-3.3322;2.2874,3.5582,-4.122;4.2067,4.1589,-2.7372;3.9566,5.4913,-2.9634;5.0338,3.871,-2.0863;4.5922,6.2476,-2.4939;2.0628,4.9441,-4.3498;2.8822,5.8937,-3.7917;1.2127,5.2408,-4.972;2.6986,6.9567,-3.9713;-4.4826,-2.196,-.2876;-4.457,-2.9886,-1.0551;-5.0067,-2.5785,.6031;-5.0997,-1.3762,-.7019;-2.1846,-1.42,-1.1495;-2.3215,-.3784,-1.4943;-1.1076,-1.5466,-.9492;-2.4303,-2.0722,-2.0009;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424335985</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000792343200 0.000143988598 0.017829333318 0.005331700977</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690045 -0.000089781 0.000046886 0.000132879 0.000185326 0.000372861 0.000416944 0.000568152 0.000746744 0.000846069 0.000957014 0.001029372 0.001226436 0.001329460 0.001383643 0.001438692 0.001551435 0.001689127 0.001802766 0.001893275 0.002172321 0.002318062 0.002468071 0.002580014 0.002677208 0.003009083 0.003069671 0.003404292 0.003517744 0.003892307 0.004449905 0.004644827 0.004734246 0.005088018 0.006032880 0.006088627 0.006262253 0.006648273 0.006936013 0.007715578 0.008117706 0.008199096 0.008443749 0.009348969 0.009965864 0.010167170 0.010640992 0.011103495 0.011871987 0.012146265 0.012907976 0.013046762 0.014145266 0.014596546 0.015308233 0.015524032 0.015884964 0.016410624 0.016791208 0.017494687 0.018130560 0.018567029 0.019440268 0.019573324 0.020098624 0.020707514 0.021233004 0.021382229 0.022455257 0.023138510 0.024239326 0.026375089 0.026796821 0.027657034 0.027828541 0.029537190 0.030325202 0.031609738 0.033293858 0.033655952 0.034107651 0.035806843 0.037044273 0.037534141 0.039561479 0.040059026 0.040822144 0.041156133 0.042485515 0.044671874 0.045424386 0.047118909 0.047976587 0.049267353 0.050479363 0.051020386 0.051235795 0.051582277 0.052486773 0.052696015 0.052926804 0.053112866 0.054736620 0.054948278 0.056040843 0.056275422 0.056549272 0.056715425 0.057223846 0.059132426 0.060561052 0.061003212 0.061721091 0.062376995 0.063322659 0.064521547 0.065330998 0.065987695 0.066556184 0.068361452 0.069074783 0.070282763 0.072746063 0.074380559 0.074789995 0.076523490 0.078524681 0.084146058 0.086723513 0.087139727 0.087622595 0.089270673 0.090566484 0.091457008 0.094040214 0.094840578 0.095790834 0.096427152 0.097851997 0.098836486 0.099363121 0.100197511 0.100931953 0.102479899 0.103212621 0.103609456 0.104372536 0.104579503 0.106348076 0.106984827 0.108166168 0.109783968 0.111032163 0.112399519 0.113384116 0.115037479 0.116207734 0.116822296 0.118707968 0.120800580 0.122305842 0.123175516 0.124594423 0.126190147 0.126297392 0.126651014 0.127241656 0.132050354 0.135082784 0.135821939 0.142811010 0.143797674 0.147078881 0.147559828 0.149753674 0.152275021 0.154668950 0.155307313 0.156630733 0.161510589 0.161903180 0.173765692 0.174262389 0.181375664 0.184867254 0.186404698 0.189615550 0.190401321 0.194159213 0.195392788 0.198688060 0.200295403 0.205251583 0.207009275 0.207379919 0.210233474 0.216415141 0.216762121 0.217963171 0.219198573 0.220833040 0.225277850 0.226701264 0.232283905 0.235122853 0.235706692 0.235995285 0.244686018 0.256082425 0.257264946 0.263884556 0.269954941 0.280716778 0.283335794 0.286333805 0.291908932 0.296941909 0.304406920 0.305798286 0.307320532 0.314414515 0.316755086 0.317401771 0.322233158 0.330106299 0.332851776 0.351830973 0.352667585 0.355094832 0.355854655 0.360076330 0.363038238 0.364272112 0.384185232 0.386044874 0.392186402 0.410587552 0.425959648 0.430987099 0.462425628 0.469136765 0.478629092 0.484209194 0.484492569 0.487599262 0.491469010 0.509639875 0.515605568 0.535442810 0.569291994 0.575153151 0.591799545 0.594072369 0.607297988 0.608398360 0.644702425 0.647582380 0.649710621 0.674347105 0.678421021 0.686102945 0.692012049 0.693623792 0.700035415 0.704598110 0.718225309 0.742263716 0.751402551 0.759438641 0.769863853 0.773222489 0.779581940 0.811002474 0.815732601 0.819918731 0.822852087 0.823593237 0.831742015 0.834974264 0.837843824 0.842504831 0.845870322 0.847551150 0.849870000 0.859292217 0.865944050 0.867270314 0.874249074 0.885989344 0.886303061 0.889719103 0.899963793 0.901087366 0.904125532 0.923808164 0.927992335 0.936491831 0.937789073 0.966205015 0.976396486 0.986741783 1.001710192 1.020239710 1.028395276 1.042073564 1.051032358 1.057669591 1.068856725 1.086898922 1.088775383 1.104724725 1.108076980 1.112535891 1.126165827 1.135984952 1.140406597 1.144680863 1.176390227 1.179052701 1.181791431 1.187025699 1.191598135 1.197584109 1.224700077 1.228356780 1.274297149 1.302740863 1.321354373 1.328401780 1.333198182 1.336493013 1.338151994 1.342468629 1.343320553 1.345029889 1.359299776 1.379327420 1.383024687 1.385711538 1.411040128 1.420468584 1.432221442 1.551493667 1.684762593 1.776139691</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">269</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33569307" y3="0.04734892" z3="-0.19034672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37987819" y3="0.1695648" z3="0.42476322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64166506" y3="0.4425164" z3="-0.33569918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7256782" y3="1.23518009" z3="-2.25902874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38515226" y3="0.43043192" z3="-1.18400596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72909007" y3="0.84336069" z3="-3.66367246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63147367" y3="1.74675657" z3="-3.13281687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38116144" y3="2.58781496" z3="-4.61725244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56182726" y3="1.24654706" z3="-4.37775544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5028044" y3="2.92272218" z3="-5.17770818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92736323" y3="-0.48713342" z3="-3.44577062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0954666" y3="0.03741937" z3="-1.00469582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40173178" y3="-1.10496403" z3="-2.00818376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92968201" y3="-0.97717505" z3="-1.83701913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10533543" y3="-2.42886712" z3="-1.85557976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1401091" y3="-3.61260958" z3="0.67396711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02323332" y3="-5.25544365" z3="-4.74240304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24934967" y3="-4.99792783" z3="-3.70407212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84137266" y3="-4.30710949" z3="-1.08338858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77695493" y3="-4.58928753" z3="-2.85457104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56414497" y3="-5.08793941" z3="-3.24307695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86089402" y3="-4.73727461" z3="-1.92835911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49308781" y3="-4.25885253" z3="-1.52783159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80946813" y3="-4.50969762" z3="-3.20389564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36399183" y3="-5.40253852" z3="-3.91652417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89681585" y3="-4.77537254" z3="-1.58245406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02873639" y3="-3.85775893" z3="0.23746996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16834753" y3="-3.64533365" z3="0.88383686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05578466" y3="-4.10920529" z3="0.45129178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16228723" y3="-3.50992855" z3="2.35084184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.219165" y3="-3.32515559" z3="5.14876646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35833605" y3="-3.71385494" z3="3.05475257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99451154" y3="-3.21986176" z3="3.07205483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02018132" y3="-3.12832282" z3="4.46069634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38605022" y3="-3.62336048" z3="4.4435663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27386297" y3="-3.95308145" z3="2.5068849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0353997" y3="-3.08692066" z3="2.56705682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09044703" y3="-2.92324641" z3="4.99903514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32437636" y3="-3.79316375" z3="4.97907467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2388552" y3="-3.26133628" z3="6.24027678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41518534" y3="-3.893948" z3="-0.62617232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17488571" y3="-3.39385064" z3="-1.0813321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52227803" y3="0.24079779" z3="-4.71637657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08080668" y3="-1.72063438" z3="0.02662139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90170444" y3="-0.96669616" z3="1.18583804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.840574" y3="-0.31195799" z3="1.51250016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36494207" y3="0.5585158" z3="1.20798585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44289337" y3="1.45023213" z3="-0.42272911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98470271" y3="-0.69919837" z3="1.39242183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34904133" y3="1.75965592" z3="2.6452892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8723383" y3="-0.95729606" z3="2.08850054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63835382" y3="-0.34196727" z3="3.34552122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20715983" y3="0.75556016" z3="-1.24720798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3329274" y3="2.23849747" z3="-0.42303953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42202564" y3="1.93559057" z3="-0.58401662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01035028" y3="-1.0624112" z3="2.43340274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95853227" y3="-0.23817474" z3="1.15546129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85974906" y3="-1.54177135" z3="0.6930546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40708448" y3="1.22719449" z3="3.61112492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58900841" y3="2.34409182" z3="2.63938305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18867191" y3="2.47529196" z3="2.59046885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77292388" y3="-0.79634176" z3="3.8538781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54991249" y3="-0.51712093" z3="3.93243843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47016225" y3="0.74036118" z3="3.22335999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83585671" y3="-0.71289849" z3="0.9900173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40947049" y3="-2.0394621" z3="0.84749539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75746135" y3="-2.68848427" z3="1.8886496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54922306" y3="-1.998089" z3="3.079186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02802433" y3="-0.70657641" z3="3.27802286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67955169" y3="-0.07095593" z3="2.22578794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51566371" y3="-2.53521799" z3="-0.11829956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36130868" y3="-3.69684141" z3="1.76248397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68897722" y3="-2.60065651" z3="4.10243898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8462913" y3="-0.19929628" z3="4.22616311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0229928" y3="0.96052733" z3="2.34431881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79506359" y3="0.46192688" z3="-4.29251711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77503019" y3="-0.50590814" z3="-4.47015485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4272507" y3="-1.69841418" z3="-5.09410403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1406026" y3="-1.92997624" z3="-5.57054995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83228457" y3="-0.95897151" z3="-5.37130177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03998403" y3="1.38586751" z3="-3.76246082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79370905" y3="-0.35927478" z3="-4.11016664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43979133" y3="-2.74710456" z3="-5.23353766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08989871" y3="-2.87090532" z3="-6.07064484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85426034" y3="-1.14527979" z3="-5.70567305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35903855" y3="-1.90860023" z3="5.04550375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31351311" y3="-3.74205364" z3="3.93212682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21450831" y3="-3.65258697" z3="-6.00778014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44484005" y3="-2.65747189" z3="-4.55626124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06708813" y3="1.16743154" z3="-1.48191627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10820149" y3="1.55508821" z3="-2.46275014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4355276" y3="1.50155658" z3="-1.67451016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8470939" y3="2.17023335" z3="-2.80113589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16021131" y3="1.20484878" z3="-0.90992729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90336261" y3="2.41667764" z3="-2.94116934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5700998" y3="2.2273944" z3="-3.62819016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90147175" y3="2.52631312" z3="-3.79258301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85049543" y3="2.49838762" z3="-4.4042773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23420074" y3="3.0368579" z3="-4.70035005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39912936" y3="3.15026258" z3="-3.32886385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28532485" y3="3.56195589" z3="-4.11860639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20390862" y3="4.16144514" z3="-2.73206022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9520307" y3="5.49439907" z3="-2.9550254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03069812" y3="3.87325032" z3="-2.08107562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58659706" y3="6.25035611" z3="-2.48368945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0595586" y3="4.94780949" z3="-4.34367736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87743472" y3="5.89722367" z3="-3.78288738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20962418" y3="5.24490201" z3="-4.96578268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69260035" y3="6.9604505" z3="-3.95997829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47996246" y3="-2.1996742" z3="-0.28630937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45243806" y3="-2.99326695" z3="-1.05191291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00509447" y3="-2.58060312" z3="0.604165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09668629" y3="-1.38103837" z3="-0.7035158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18202521" y3="-1.42538002" z3="-1.14794672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32089619" y3="-0.38549769" z3="-1.49658216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10446416" y3="-1.55049109" z3="-0.94728377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42575156" y3="-2.08088198" z3="-1.99754029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3357,.0473,-.1903;7.3799,.1696,.4248;6.6417,.4425,-.3357;4.7257,1.2352,-2.259;4.3852,.4304,-1.184;2.7291,.8434,-3.6637;3.6315,1.7468,-3.1328;1.3812,2.5878,-4.6173;1.5618,1.2465,-4.3778;.5028,2.9227,-5.1777;2.9274,-.4871,-3.4458;3.0955,.0374,-1.0047;2.4017,-1.105,-2.0082;.9297,-.9772,-1.837;3.1053,-2.4289,-1.8556;-.1401,-3.6126,.674;-.0232,-5.2554,-4.7424;-.2493,-4.9979,-3.7041;-.8414,-4.3071,-1.0834;.777,-4.5893,-2.8546;-1.5641,-5.0879,-3.2431;-1.8609,-4.7373,-1.9284;.4931,-4.2589,-1.5278;1.8095,-4.5097,-3.2039;-2.364,-5.4025,-3.9165;-2.8968,-4.7754,-1.5825;-1.0287,-3.8578,.2375;-2.1683,-3.6453,.8838;-3.0558,-4.1092,.4513;-2.1623,-3.5099,2.3508;-2.2192,-3.3252,5.1488;-3.3583,-3.7139,3.0548;-.9945,-3.2199,3.0721;-1.0202,-3.1283,4.4607;-3.3861,-3.6234,4.4436;-4.2739,-3.9531,2.5069;-.0354,-3.0869,2.5671;-.0904,-2.9232,4.999;-4.3244,-3.7932,4.9791;-2.2389,-3.2613,6.2403;1.4152,-3.8939,-.6262;2.1749,-3.3939,-1.0813;.5223,.2408,-4.7164;-3.0808,-1.7206,.0266;-2.9017,-.9667,1.1858;-1.8406,-.312,1.5125;-.3649,.5585,1.208;-.4429,1.4502,-.4227;.9847,-.6992,1.3924;-.349,1.7597,2.6453;-3.8723,-.9573,2.0885;-3.6384,-.342,3.3455;-.2072,.7556,-1.2472;.3329,2.2385,-.423;-1.422,1.9356,-.584;1.0104,-1.0624,2.4334;1.9585,-.2382,1.1555;.8597,-1.5418,.6931;-.4071,1.2272,3.6111;.589,2.3441,2.6394;-1.1887,2.4753,2.5905;-2.7729,-.7963,3.8539;-4.5499,-.5171,3.9324;-3.4702,.7404,3.2234;4.8359,-.7129,.99;4.4095,-2.0395,.8475;3.7575,-2.6885,1.8886;3.5492,-1.9981,3.0792;4.028,-.7066,3.278;4.6796,-.071,2.2258;4.5157,-2.5352,-.1183;3.3613,-3.6968,1.7625;2.689,-2.6007,4.1024;3.8463,-.1993,4.2262;5.023,.9605,2.3443;-.7951,.4619,-4.2925;-1.775,-.5059,-4.4702;-1.4273,-1.6984,-5.0941;-.1406,-1.93,-5.5705;.8323,-.959,-5.3713;-1.04,1.3859,-3.7625;-2.7937,-.3593,-4.1102;-2.4398,-2.7471,-5.2335;.0899,-2.8709,-6.0706;1.8543,-1.1453,-5.7057;2.359,-1.9086,5.0455;2.3135,-3.7421,3.9321;-2.2145,-3.6526,-6.0078;-3.4448,-2.6575,-4.5563;7.0671,1.1674,-1.4819;6.1082,1.5551,-2.4628;8.4355,1.5016,-1.6745;8.8471,2.1702,-2.8011;9.1602,1.2048,-.9099;9.9034,2.4167,-2.9412;6.5701,2.2274,-3.6282;7.9015,2.5263,-3.7926;5.8505,2.4984,-4.4043;8.2342,3.0369,-4.7004;3.3991,3.1503,-3.3289;2.2853,3.562,-4.1186;4.2039,4.1614,-2.7321;3.952,5.4944,-2.955;5.0307,3.8733,-2.0811;4.5866,6.2504,-2.4837;2.0596,4.9478,-4.3437;2.8774,5.8972,-3.7829;1.2096,5.2449,-4.9658;2.6926,6.9605,-3.96;-4.48,-2.1997,-.2863;-4.4524,-2.9933,-1.0519;-5.0051,-2.5806,.6042;-5.0967,-1.381,-.7035;-2.182,-1.4254,-1.1479;-2.3209,-.3855,-1.4966;-1.1045,-1.5505,-.9473;-2.4258,-2.0809,-1.9975;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422798506</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001127664138 0.000170480626 0.018847351581 0.005329845661</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030690499 -0.000136149 0.000038808 0.000128375 0.000184447 0.000372877 0.000421368 0.000579531 0.000765707 0.000856578 0.000998306 0.001039184 0.001231106 0.001351612 0.001398177 0.001441226 0.001557108 0.001690635 0.001805284 0.001893813 0.002175526 0.002320449 0.002468054 0.002580207 0.002678554 0.003008991 0.003072588 0.003405038 0.003517835 0.003900275 0.004450403 0.004656500 0.004736347 0.005088010 0.006037427 0.006089393 0.006265583 0.006648246 0.006935713 0.007718064 0.008117702 0.008200379 0.008444564 0.009348982 0.009965800 0.010168521 0.010644295 0.011103505 0.011875383 0.012147436 0.012915726 0.013049224 0.014147601 0.014596918 0.015315015 0.015523941 0.015889669 0.016414506 0.016792296 0.017496140 0.018130282 0.018569983 0.019441364 0.019573393 0.020098626 0.020710496 0.021234129 0.021382090 0.022455165 0.023138829 0.024240022 0.026378826 0.026799240 0.027662402 0.027828411 0.029540153 0.030325469 0.031609897 0.033293976 0.033655920 0.034108207 0.035807323 0.037049165 0.037534109 0.039561756 0.040058966 0.040821931 0.041158201 0.042496695 0.044671967 0.045427011 0.047118782 0.047976561 0.049267395 0.050482617 0.051023846 0.051235838 0.051584417 0.052486861 0.052696235 0.052926798 0.053112996 0.054738424 0.054948485 0.056040772 0.056275428 0.056552405 0.056716617 0.057224149 0.059138523 0.060560997 0.061005045 0.061721943 0.062377419 0.063322664 0.064522641 0.065331495 0.065989307 0.066563673 0.068361774 0.069074579 0.070282710 0.072746284 0.074382917 0.074790245 0.076525662 0.078528466 0.084163465 0.086731115 0.087140031 0.087624679 0.089276054 0.090566463 0.091457077 0.094041406 0.094852708 0.095792863 0.096427815 0.097852009 0.098836396 0.099368654 0.100197505 0.100932691 0.102479950 0.103212641 0.103609352 0.104373276 0.104580098 0.106348015 0.106984831 0.108166496 0.109785006 0.111035709 0.112400967 0.113418781 0.115037706 0.116209093 0.116822523 0.118709002 0.120804447 0.122311938 0.123176278 0.124594483 0.126190115 0.126299262 0.126652647 0.127244977 0.132050359 0.135082545 0.135826524 0.142814855 0.143804344 0.147079645 0.147561534 0.149753746 0.152277473 0.154669078 0.155307077 0.156631053 0.161514621 0.161903153 0.173765913 0.174262699 0.181395096 0.184867367 0.186406023 0.189616759 0.190400874 0.194162157 0.195393577 0.198689921 0.200295459 0.205254801 0.207010948 0.207380067 0.210234247 0.216421355 0.216761952 0.217963645 0.219199824 0.220833439 0.225277863 0.226701499 0.232290822 0.235122998 0.235707334 0.235995359 0.244686133 0.256082406 0.257265934 0.263887732 0.269954914 0.280724500 0.283336764 0.286333829 0.291909140 0.296951356 0.304407696 0.305800002 0.307320739 0.314415345 0.316757289 0.317401842 0.322233197 0.330107584 0.332852059 0.351831026 0.352681360 0.355096318 0.355855617 0.360077388 0.363038244 0.364279897 0.384185276 0.386045284 0.392188746 0.410589703 0.425966600 0.430999393 0.462429912 0.469136851 0.478631683 0.484222334 0.484493539 0.487601016 0.491470095 0.509639912 0.515605767 0.535442857 0.569294558 0.575159235 0.591802939 0.594072385 0.607298184 0.608399865 0.644702853 0.647585888 0.649715376 0.674347373 0.678423393 0.686118523 0.692012074 0.693625111 0.700036724 0.704616414 0.718243833 0.742263948 0.751408746 0.759438738 0.769908181 0.773223318 0.779582100 0.811002670 0.815738951 0.819918697 0.822858776 0.823596335 0.831744382 0.834975529 0.837844142 0.842513805 0.845874714 0.847551041 0.849881179 0.859294142 0.865945551 0.867279707 0.874256114 0.885989547 0.886303163 0.889720678 0.899970712 0.901087863 0.904125942 0.923812779 0.928002143 0.936499697 0.937793460 0.966206659 0.976400822 0.986755612 1.001710180 1.020240694 1.028407063 1.042073919 1.051035876 1.057670252 1.068856883 1.086901555 1.088777027 1.104726028 1.108081735 1.112539727 1.126175877 1.135984984 1.140422525 1.144681555 1.176392798 1.179056555 1.181796141 1.187028670 1.191598128 1.197635949 1.224708671 1.228358936 1.274314056 1.302747760 1.321356713 1.328409125 1.333198845 1.336492850 1.338154018 1.342469575 1.343321421 1.345031469 1.359302793 1.379330412 1.383045784 1.385720850 1.411082744 1.420488479 1.432226177 1.551493629 1.684852094 1.776142438</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">270</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33778571" y3="0.04638806" z3="-0.19396823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38293768" y3="0.16454029" z3="0.41747593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64408492" y3="0.44017763" z3="-0.3411339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72611302" y3="1.23656477" z3="-2.26074496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38631" y3="0.43139468" z3="-1.18597233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72969867" y3="0.84484381" z3="-3.66457085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63161267" y3="1.74812814" z3="-3.13404333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37910666" y3="2.58896975" z3="-4.6154432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56186797" y3="1.24794444" z3="-4.37742956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49976897" y3="2.92369788" z3="-5.17452873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92861266" y3="-0.48549335" z3="-3.44648836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09675336" y3="0.03932288" z3="-1.00566332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40130967" y3="-1.10213887" z3="-2.00895415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9294633" y3="-0.97130704" z3="-1.83868118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1023759" y3="-2.42723803" z3="-1.85536441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1423922" y3="-3.61666213" z3="0.6786205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0241727" y3="-5.255901" z3="-4.73869425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25048305" y3="-4.99964164" z3="-3.70025318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84326146" y3="-4.31100335" z3="-1.07913966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77540581" y3="-4.58895063" z3="-2.85100393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56518807" y3="-5.09265554" z3="-3.23875921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86230082" y3="-4.74342416" z3="-1.92382881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49104932" y3="-4.25923894" z3="-1.52430547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80668135" y3="-4.50437755" z3="-3.20038218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36563698" y3="-5.40734413" z3="-3.91229417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89767895" y3="-4.78526926" z3="-1.5775401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03127735" y3="-3.86142932" z3="0.24157371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17121995" y3="-3.6453857" z3="0.88635027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05973855" y3="-4.10786034" z3="0.45380107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16641337" y3="-3.50648393" z3="2.35302613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22498827" y3="-3.31384004" z3="5.15046593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36374" y3="-3.70472485" z3="3.05628385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99822383" y3="-3.21860123" z3="3.07468051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02484096" y3="-3.12273601" z3="4.46302287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.392005" y3="-3.61067196" z3="4.44495554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2795938" y3="-3.94229" z3="2.50815884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03723636" y3="-3.09224974" z3="2.57034585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0948029" y3="-2.91919503" z3="5.00139783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33088826" y3="-3.7766441" z3="4.98003755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24535471" y3="-3.24702271" z3="6.24186577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41305095" y3="-3.89147344" z3="-0.62330986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17190599" y3="-3.39117599" z3="-1.07929273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52412123" y3="0.24072989" z3="-4.71726066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07801286" y3="-1.72042981" z3="0.02334713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90268828" y3="-0.96564222" z3="1.18243157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84207765" y3="-0.31264162" z3="1.51385667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36283593" y3="0.5524105" z3="1.21216359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44061702" y3="1.45119049" z3="-0.41442545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98418816" y3="-0.70893357" z3="1.38988194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3408026" y3="1.74613989" z3="2.6557962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87769668" y3="-0.9532745" z3="2.08005861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64969474" y3="-0.33504546" z3="3.33651583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2075268" y3="0.7599316" z3="-1.24208574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33842633" y3="2.23668253" z3="-0.41232659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41822522" y3="1.93983106" z3="-0.57236473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01221619" y3="-1.0728237" z3="2.4301381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95855689" y3="-0.2494122" z3="1.15100482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85707858" y3="-1.55096737" z3="0.690379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.3995754" y3="1.20834714" z3="3.61860521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59963525" y3="2.32692867" z3="2.65215347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17791388" y3="2.46498576" z3="2.60613989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78811898" y3="-0.79020068" z3="3.85099323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56506915" y3="-0.50683498" z3="3.91808252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47840727" y3="0.74704923" z3="3.21283516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83896061" y3="-0.71382111" z3="0.98695766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41332373" y3="-2.04055569" z3="0.84498505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76104081" y3="-2.6893281" z3="1.88610656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55175497" y3="-1.99865469" z3="3.07592367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03066999" y3="-0.70719144" z3="3.27474397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68228832" y3="-0.07163833" z3="2.22251825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51692727" y3="-2.53570571" z3="-0.12288452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3643058" y3="-3.6975088" z3="1.75962799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69036249" y3="-2.60057775" z3="4.09870341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84844445" y3="-0.19981953" z3="4.22256638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02478963" y3="0.95994788" z3="2.34052781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79316567" y3="0.4586195" z3="-4.29214781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77107045" y3="-0.51092918" z3="-4.46933462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42124409" y3="-1.70206167" z3="-5.09420478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1348155" y3="-1.93018084" z3="-5.57350455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83611504" y3="-0.95746414" z3="-5.37429154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03922328" y3="1.38138824" z3="-3.76030547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78989573" y3="-0.36700296" z3="-4.10853701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43109101" y3="-2.75349172" z3="-5.2339314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09696069" y3="-2.87000452" z3="-6.07468775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85791662" y3="-1.14132419" z3="-5.71017161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36864992" y3="-1.91159727" z3="5.04755214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30730315" y3="-3.7384244" z3="3.9238582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20652265" y3="-3.65467903" z3="-6.01316983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43285336" y3="-2.67006692" z3="-4.5519282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06868873" y3="1.16671161" z3="-1.48691964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10873293" y3="1.55727175" z3="-2.46540529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43707631" y3="1.49927926" z3="-1.68173569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84736245" y3="2.16992336" z3="-2.80788799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16280752" y3="1.1999518" z3="-0.91924812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90356173" y3="2.41513269" z3="-2.94961504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56945266" y3="2.23294763" z3="-3.63006269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90064289" y3="2.53010173" z3="-3.79661981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84887458" y3="2.50682096" z3="-4.40412596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23235001" y3="3.04396831" z3="-4.7037637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39697819" y3="3.15205281" z3="-3.32766574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2819081" y3="3.56351215" z3="-4.11580095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20011331" y3="4.16408728" z3="-2.72913937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94577765" y3="5.49672952" z3="-2.94955799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02854639" y3="3.87578165" z3="-2.08010397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57923968" y3="6.25301618" z3="-2.47714245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05287121" y3="4.94973966" z3="-4.33730747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86944826" y3="5.89935752" z3="-3.77536096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20153634" y3="5.24661593" z3="-4.95774416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68235943" y3="6.96251281" z3="-3.94999739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47675521" y3="-2.19806297" z3="-0.29404318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44833469" y3="-2.99410935" z3="-1.05790695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00627331" y3="-2.57574004" z3="0.59566095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09024682" y3="-1.37911575" z3="-0.7153085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17453002" y3="-1.42722892" z3="-1.14789126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31001381" y3="-0.38669785" z3="-1.49699775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09841722" y3="-1.55298145" z3="-0.94318056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41644294" y3="-2.08240239" z3="-1.99833146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3378,.0464,-.194;7.3829,.1645,.4175;6.6441,.4402,-.3411;4.7261,1.2366,-2.2607;4.3863,.4314,-1.186;2.7297,.8448,-3.6646;3.6316,1.7481,-3.134;1.3791,2.589,-4.6154;1.5619,1.2479,-4.3774;.4998,2.9237,-5.1745;2.9286,-.4855,-3.4465;3.0968,.0393,-1.0057;2.4013,-1.1021,-2.009;.9295,-.9713,-1.8387;3.1024,-2.4272,-1.8554;-.1424,-3.6167,.6786;-.0242,-5.2559,-4.7387;-.2505,-4.9996,-3.7003;-.8433,-4.311,-1.0791;.7754,-4.589,-2.851;-1.5652,-5.0927,-3.2388;-1.8623,-4.7434,-1.9238;.491,-4.2592,-1.5243;1.8067,-4.5044,-3.2004;-2.3656,-5.4073,-3.9123;-2.8977,-4.7853,-1.5775;-1.0313,-3.8614,.2416;-2.1712,-3.6454,.8864;-3.0597,-4.1079,.4538;-2.1664,-3.5065,2.353;-2.225,-3.3138,5.1505;-3.3637,-3.7047,3.0563;-.9982,-3.2186,3.0747;-1.0248,-3.1227,4.463;-3.392,-3.6107,4.445;-4.2796,-3.9423,2.5082;-.0372,-3.0922,2.5703;-.0948,-2.9192,5.0014;-4.3309,-3.7766,4.98;-2.2454,-3.247,6.2419;1.4131,-3.8915,-.6233;2.1719,-3.3912,-1.0793;.5241,.2407,-4.7173;-3.078,-1.7204,.0233;-2.9027,-.9656,1.1824;-1.8421,-.3126,1.5139;-.3628,.5524,1.2122;-.4406,1.4512,-.4144;.9842,-.7089,1.3899;-.3408,1.7461,2.6558;-3.8777,-.9533,2.0801;-3.6497,-.335,3.3365;-.2075,.7599,-1.2421;.3384,2.2367,-.4123;-1.4182,1.9398,-.5724;1.0122,-1.0728,2.4301;1.9586,-.2494,1.151;.8571,-1.551,.6904;-.3996,1.2083,3.6186;.5996,2.3269,2.6522;-1.1779,2.465,2.6061;-2.7881,-.7902,3.851;-4.5651,-.5068,3.9181;-3.4784,.747,3.2128;4.839,-.7138,.987;4.4133,-2.0406,.845;3.761,-2.6893,1.8861;3.5518,-1.9987,3.0759;4.0307,-.7072,3.2747;4.6823,-.0716,2.2225;4.5169,-2.5357,-.1229;3.3643,-3.6975,1.7596;2.6904,-2.6006,4.0987;3.8484,-.1998,4.2226;5.0248,.9599,2.3405;-.7932,.4586,-4.2921;-1.7711,-.5109,-4.4693;-1.4212,-1.7021,-5.0942;-.1348,-1.9302,-5.5735;.8361,-.9575,-5.3743;-1.0392,1.3814,-3.7603;-2.7899,-.367,-4.1085;-2.4311,-2.7535,-5.2339;.097,-2.87,-6.0747;1.8579,-1.1413,-5.7102;2.3686,-1.9116,5.0476;2.3073,-3.7384,3.9239;-2.2065,-3.6547,-6.0132;-3.4329,-2.6701,-4.5519;7.0687,1.1667,-1.4869;6.1087,1.5573,-2.4654;8.4371,1.4993,-1.6817;8.8474,2.1699,-2.8079;9.1628,1.2,-.9192;9.9036,2.4151,-2.9496;6.5695,2.2329,-3.6301;7.9006,2.5301,-3.7966;5.8489,2.5068,-4.4041;8.2324,3.044,-4.7038;3.397,3.1521,-3.3277;2.2819,3.5635,-4.1158;4.2001,4.1641,-2.7291;3.9458,5.4967,-2.9496;5.0285,3.8758,-2.0801;4.5792,6.253,-2.4771;2.0529,4.9497,-4.3373;2.8694,5.8994,-3.7754;1.2015,5.2466,-4.9577;2.6824,6.9625,-3.95;-4.4768,-2.1981,-.294;-4.4483,-2.9941,-1.0579;-5.0063,-2.5757,.5957;-5.0902,-1.3791,-.7153;-2.1745,-1.4272,-1.1479;-2.31,-.3867,-1.497;-1.0984,-1.553,-.9432;-2.4164,-2.0824,-1.9983;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422060116</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001229132851 0.000192816288 0.019927961515 0.005357904797</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030691591 -0.000039214 0.000034008 0.000125025 0.000175783 0.000372993 0.000419175 0.000575459 0.000765160 0.000858054 0.001008283 0.001046515 0.001231502 0.001357215 0.001409406 0.001444467 0.001558785 0.001695959 0.001805659 0.001893891 0.002174687 0.002323675 0.002467959 0.002580967 0.002679534 0.003008995 0.003079250 0.003405652 0.003517849 0.003907390 0.004450792 0.004667220 0.004738540 0.005088006 0.006048403 0.006090886 0.006269384 0.006648265 0.006935500 0.007720342 0.008117776 0.008200878 0.008445089 0.009348992 0.009966291 0.010169031 0.010648244 0.011104216 0.011881641 0.012147476 0.012923353 0.013053464 0.014151827 0.014596953 0.015322287 0.015524020 0.015896936 0.016422928 0.016795344 0.017497463 0.018130121 0.018576161 0.019442556 0.019573702 0.020098454 0.020714161 0.021235363 0.021382246 0.022455129 0.023138940 0.024240559 0.026383765 0.026801608 0.027668710 0.027828774 0.029543072 0.030325416 0.031609880 0.033293937 0.033655966 0.034108702 0.035808050 0.037056772 0.037534096 0.039562582 0.040060444 0.040822043 0.041159527 0.042508190 0.044672597 0.045431044 0.047118852 0.047976650 0.049267392 0.050487122 0.051026136 0.051236014 0.051587420 0.052487001 0.052696495 0.052926791 0.053113257 0.054740105 0.054948832 0.056040728 0.056275474 0.056555816 0.056719124 0.057224272 0.059146059 0.060561014 0.061009654 0.061722729 0.062378372 0.063322762 0.064522985 0.065331689 0.065991014 0.066570276 0.068363714 0.069074381 0.070282639 0.072746781 0.074386234 0.074790300 0.076527719 0.078533980 0.084178520 0.086740021 0.087140061 0.087624954 0.089286048 0.090566541 0.091457154 0.094042315 0.094868265 0.095794890 0.096429126 0.097852027 0.098836374 0.099375944 0.100197527 0.100933167 0.102479941 0.103212594 0.103609411 0.104373843 0.104579813 0.106348145 0.106984833 0.108166822 0.109787281 0.111043170 0.112406554 0.113455495 0.115038216 0.116212698 0.116822413 0.118710019 0.120808582 0.122317816 0.123176168 0.124594543 0.126189971 0.126301861 0.126654249 0.127251898 0.132050935 0.135082248 0.135829542 0.142818207 0.143815493 0.147080015 0.147562677 0.149753681 0.152284435 0.154669221 0.155306590 0.156633587 0.161518075 0.161903138 0.173766015 0.174262983 0.181425813 0.184867665 0.186409588 0.189620920 0.190400683 0.194167012 0.195395011 0.198692043 0.200296133 0.205256783 0.207014458 0.207380219 0.210235681 0.216428199 0.216762625 0.217965129 0.219199991 0.220833468 0.225277894 0.226702019 0.232301345 0.235123284 0.235707439 0.235995450 0.244686778 0.256082469 0.257267282 0.263892157 0.269954883 0.280734212 0.283337817 0.286333824 0.291909468 0.296963956 0.304407693 0.305802222 0.307320864 0.314418379 0.316761311 0.317401903 0.322233216 0.330108801 0.332851998 0.351831649 0.352700146 0.355098894 0.355856468 0.360078532 0.363038222 0.364290071 0.384185231 0.386045827 0.392189698 0.410593002 0.425974645 0.431018543 0.462434863 0.469138176 0.478641170 0.484241162 0.484494416 0.487605581 0.491472736 0.509639878 0.515606116 0.535443010 0.569299556 0.575166921 0.591806454 0.594072465 0.607299130 0.608402782 0.644704679 0.647587015 0.649721668 0.674347802 0.678425027 0.686137585 0.692012098 0.693624937 0.700037103 0.704643355 0.718259720 0.742263948 0.751416726 0.759438951 0.769960152 0.773224116 0.779583688 0.811003330 0.815750875 0.819918662 0.822865461 0.823600608 0.831746716 0.834977877 0.837844123 0.842527669 0.845881593 0.847551698 0.849898083 0.859296695 0.865946646 0.867284096 0.874269232 0.885991710 0.886303804 0.889721939 0.899975616 0.901087853 0.904126602 0.923818261 0.928017125 0.936506801 0.937801996 0.966210294 0.976407948 0.986778823 1.001710309 1.020244950 1.028425986 1.042074169 1.051040769 1.057670930 1.068856876 1.086906642 1.088779292 1.104732272 1.108088454 1.112545199 1.126181908 1.135985025 1.140453067 1.144681651 1.176398821 1.179060444 1.181804137 1.187031225 1.191599149 1.197705797 1.224716750 1.228360757 1.274317585 1.302755358 1.321358548 1.328411720 1.333199643 1.336493435 1.338156399 1.342470773 1.343324959 1.345033310 1.359304369 1.379333012 1.383078785 1.385727306 1.411169357 1.420496722 1.432235057 1.551493816 1.684963139 1.776143410</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">271</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34440436" y3="0.04638974" z3="-0.19624487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39220404" y3="0.16145211" z3="0.4084509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65105182" y3="0.43728174" z3="-0.34807984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72814737" y3="1.23651586" z3="-2.26170609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39050971" y3="0.43221645" z3="-1.18557331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72832303" y3="0.84511974" z3="-3.66072417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63117461" y3="1.74876535" z3="-3.13157078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37501068" y3="2.58909279" z3="-4.6072711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55894491" y3="1.24774749" z3="-4.37164277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49445557" y3="2.92376493" z3="-5.16442638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92779914" y3="-0.48519609" z3="-3.44250359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10086079" y3="0.04123593" z3="-1.00181364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40323184" y3="-1.10050441" z3="-2.00331946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93171603" y3="-0.96883742" z3="-1.83090222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10406544" y3="-2.42575673" z3="-1.8498447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14496246" y3="-3.61838511" z3="0.67909564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01715323" y3="-5.25308667" z3="-4.73945645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24534295" y3="-4.99733376" z3="-3.70119815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84231437" y3="-4.31113296" z3="-1.08055675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77872725" y3="-4.58577711" z3="-2.85029296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56020539" y3="-5.09246673" z3="-3.24171278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85949834" y3="-4.74417365" z3="-1.92693162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49238483" y3="-4.25743365" z3="-1.52363193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81116635" y3="-4.50189608" z3="-3.19856379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35832258" y3="-5.4089586" z3="-3.91641267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89550339" y3="-4.78657366" z3="-1.5820213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03269341" y3="-3.8628379" z3="0.24020635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17362357" y3="-3.64634055" z3="0.88309892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06156093" y3="-4.10823992" z3="0.44912666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17026291" y3="-3.50811576" z3="2.34985875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23189453" y3="-3.31511536" z3="5.14711458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36808956" y3="-3.70731908" z3="3.05201767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00322729" y3="-3.2186595" z3="3.07250972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03115796" y3="-3.12295988" z3="4.46078671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39808885" y3="-3.61287473" z3="4.44052032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28311611" y3="-3.94572687" z3="2.50307765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04288484" y3="-3.08900244" z3="2.5692547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10180572" y3="-2.91796911" z3="4.99979581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33783671" y3="-3.77877554" z3="4.97475127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2535965" y3="-3.24799059" z3="6.23838872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41204154" y3="-3.8892134" z3="-0.62085709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17237562" y3="-3.38920883" z3="-1.07535723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52169801" y3="0.24028983" z3="-4.71234759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07685222" y3="-1.72026548" z3="0.019993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9034529" y3="-0.9671332" z3="1.18051662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84171551" y3="-0.31768682" z3="1.51564766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36365853" y3="0.55119894" z3="1.21942191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43994301" y3="1.45416785" z3="-0.40523917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98561813" y3="-0.70796109" z3="1.39581412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34649082" y3="1.73999308" z3="2.66693864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88105983" y3="-0.95350467" z3="2.07561607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65572319" y3="-0.33560899" z3="3.33286159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20316515" y3="0.76471555" z3="-1.23386539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33556238" y3="2.24263161" z3="-0.39983397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41900344" y3="1.94037062" z3="-0.5643934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01439912" y3="-1.07342492" z3="2.4359381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95862859" y3="-0.24574753" z3="1.15756655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85972586" y3="-1.54916433" z3="0.69500459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4045802" y3="1.1981597" z3="3.62771647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5919565" y3="2.32380895" z3="2.66652538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18580418" y3="2.45657851" z3="2.61925333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79642788" y3="-0.7915247" z3="3.8500349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57306661" y3="-0.50568225" z3="3.91222101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48246503" y3="0.74575497" z3="3.2091528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84593499" y3="-0.71122293" z3="0.98657256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41975132" y3="-2.03822956" z3="0.84803045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76526623" y3="-2.68326829" z3="1.89014823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55462902" y3="-1.98863593" z3="3.07765034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0343697" y3="-0.69688764" z3="3.27324905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68799248" y3="-0.06517543" z3="2.21993595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52687734" y3="-2.53725725" z3="-0.11599416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36795754" y3="-3.69153775" z3="1.7663322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68930688" y3="-2.58596086" z3="4.09980999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85099343" y3="-0.18608592" z3="4.21912015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03133918" y3="0.96662447" z3="2.33530888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79628392" y3="0.45621774" z3="-4.28787787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77340994" y3="-0.51393149" z3="-4.46779436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42204868" y3="-1.70369427" z3="-5.09513507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13480897" y3="-1.93003493" z3="-5.57261457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83518765" y3="-0.95660479" z3="-5.37051648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04384925" y3="1.37779661" z3="-3.75477378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79254026" y3="-0.37138399" z3="-4.10748149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4308351" y3="-2.75569862" z3="-5.23636887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09841018" y3="-2.86885423" z3="-6.07516715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85774746" y3="-1.13874683" z3="-5.70562533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36100415" y3="-1.89177961" z3="5.041711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30833968" y3="-3.72532578" z3="3.9297862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20431364" y3="-3.655918" z3="-6.0162949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43379927" y3="-2.67445337" z3="-4.55511949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07301297" y3="1.16141692" z3="-1.49610736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11029223" y3="1.55350003" z3="-2.47148539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44152679" y3="1.49059871" z3="-1.69596906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84923306" y3="2.15917952" z3="-2.82399122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16945842" y3="1.19013392" z3="-0.93593904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90565781" y3="2.40211542" z3="-2.96954301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56800279" y3="2.22629642" z3="-3.63824028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.8994899" y3="2.52069478" z3="-3.80950207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84514494" y3="2.50105986" z3="-4.40997479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22903448" y3="3.03187782" z3="-4.71820734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39622475" y3="3.15223442" z3="-3.32411193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27843265" y3="3.56381124" z3="-4.10828078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20183079" y3="4.16323176" z3="-2.72806703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94575337" y3="5.496253" z3="-2.94535829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03267952" y3="3.87447795" z3="-2.08238245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58081699" y3="6.25209118" z3="-2.47464982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04828274" y3="4.94987055" z3="-4.32745837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8660826" y3="5.89929821" z3="-3.76656066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19493029" y3="5.24702626" z3="-4.94488028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67746445" y3="6.96268136" z3="-3.93864832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47490912" y3="-2.19566934" z3="-0.30289688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44367852" y3="-2.98887598" z3="-1.06864171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00730611" y3="-2.57576553" z3="0.58346535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08661665" y3="-1.37531572" z3="-0.72416721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16973261" y3="-1.42685946" z3="-1.14848245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30443804" y3="-0.38689797" z3="-1.498159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09372182" y3="-1.55334979" z3="-0.94122489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40913693" y3="-2.08208603" z3="-1.9994484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3444,.0464,-.1962;7.3922,.1615,.4085;6.6511,.4373,-.3481;4.7281,1.2365,-2.2617;4.3905,.4322,-1.1856;2.7283,.8451,-3.6607;3.6312,1.7488,-3.1316;1.375,2.5891,-4.6073;1.5589,1.2477,-4.3716;.4945,2.9238,-5.1644;2.9278,-.4852,-3.4425;3.1009,.0412,-1.0018;2.4032,-1.1005,-2.0033;.9317,-.9688,-1.8309;3.1041,-2.4258,-1.8498;-.145,-3.6184,.6791;-.0172,-5.2531,-4.7395;-.2453,-4.9973,-3.7012;-.8423,-4.3111,-1.0806;.7787,-4.5858,-2.8503;-1.5602,-5.0925,-3.2417;-1.8595,-4.7442,-1.9269;.4924,-4.2574,-1.5236;1.8112,-4.5019,-3.1986;-2.3583,-5.409,-3.9164;-2.8955,-4.7866,-1.582;-1.0327,-3.8628,.2402;-2.1736,-3.6463,.8831;-3.0616,-4.1082,.4491;-2.1703,-3.5081,2.3499;-2.2319,-3.3151,5.1471;-3.3681,-3.7073,3.052;-1.0032,-3.2187,3.0725;-1.0312,-3.123,4.4608;-3.3981,-3.6129,4.4405;-4.2831,-3.9457,2.5031;-.0429,-3.089,2.5693;-.1018,-2.918,4.9998;-4.3378,-3.7788,4.9748;-2.2536,-3.248,6.2384;1.412,-3.8892,-.6209;2.1724,-3.3892,-1.0754;.5217,.2403,-4.7123;-3.0769,-1.7203,.02;-2.9035,-.9671,1.1805;-1.8417,-.3177,1.5156;-.3637,.5512,1.2194;-.4399,1.4542,-.4052;.9856,-.708,1.3958;-.3465,1.74,2.6669;-3.8811,-.9535,2.0756;-3.6557,-.3356,3.3329;-.2032,.7647,-1.2339;.3356,2.2426,-.3998;-1.419,1.9404,-.5644;1.0144,-1.0734,2.4359;1.9586,-.2457,1.1576;.8597,-1.5492,.695;-.4046,1.1982,3.6277;.592,2.3238,2.6665;-1.1858,2.4566,2.6193;-2.7964,-.7915,3.85;-4.5731,-.5057,3.9122;-3.4825,.7458,3.2092;4.8459,-.7112,.9866;4.4198,-2.0382,.848;3.7653,-2.6833,1.8901;3.5546,-1.9886,3.0777;4.0344,-.6969,3.2732;4.688,-.0652,2.2199;4.5269,-2.5373,-.116;3.368,-3.6915,1.7663;2.6893,-2.586,4.0998;3.851,-.1861,4.2191;5.0313,.9666,2.3353;-.7963,.4562,-4.2879;-1.7734,-.5139,-4.4678;-1.422,-1.7037,-5.0951;-.1348,-1.93,-5.5726;.8352,-.9566,-5.3705;-1.0438,1.3778,-3.7548;-2.7925,-.3714,-4.1075;-2.4308,-2.7557,-5.2364;.0984,-2.8689,-6.0752;1.8577,-1.1387,-5.7056;2.361,-1.8918,5.0417;2.3083,-3.7253,3.9298;-2.2043,-3.6559,-6.0163;-3.4338,-2.6745,-4.5551;7.073,1.1614,-1.4961;6.1103,1.5535,-2.4715;8.4415,1.4906,-1.696;8.8492,2.1592,-2.824;9.1695,1.1901,-.9359;9.9057,2.4021,-2.9695;6.568,2.2263,-3.6382;7.8995,2.5207,-3.8095;5.8451,2.5011,-4.41;8.229,3.0319,-4.7182;3.3962,3.1522,-3.3241;2.2784,3.5638,-4.1083;4.2018,4.1632,-2.7281;3.9458,5.4963,-2.9454;5.0327,3.8745,-2.0824;4.5808,6.2521,-2.4746;2.0483,4.9499,-4.3275;2.8661,5.8993,-3.7666;1.1949,5.247,-4.9449;2.6775,6.9627,-3.9386;-4.4749,-2.1957,-.3029;-4.4437,-2.9889,-1.0686;-5.0073,-2.5758,.5835;-5.0866,-1.3753,-.7242;-2.1697,-1.4269,-1.1485;-2.3044,-.3869,-1.4982;-1.0937,-1.5533,-.9412;-2.4091,-2.0821,-1.9994;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421852693</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001157896490 0.000165213861 0.023277575299 0.005325373118</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030691750 -0.000313246 -0.000015318 0.000175136 0.000263311 0.000360242 0.000425945 0.000587535 0.000763532 0.000864599 0.000998483 0.001057079 0.001233390 0.001361250 0.001412375 0.001434609 0.001560434 0.001692112 0.001806928 0.001891587 0.002166005 0.002330933 0.002441921 0.002572885 0.002672178 0.002999913 0.003080409 0.003395796 0.003511274 0.003915959 0.004450597 0.004671587 0.004741309 0.005088617 0.006053922 0.006078674 0.006286044 0.006649820 0.006934233 0.007704676 0.008105086 0.008173790 0.008381413 0.009350109 0.009935932 0.010141846 0.010650486 0.011108164 0.011889333 0.012142180 0.012924654 0.013057064 0.014159388 0.014595922 0.015328961 0.015524321 0.015905949 0.016443918 0.016800658 0.017501187 0.018129171 0.018586502 0.019435273 0.019572625 0.020097152 0.020708561 0.021237380 0.021380839 0.022445955 0.023137833 0.024202644 0.026386116 0.026802466 0.027671201 0.027832739 0.029545275 0.030325143 0.031612719 0.033293930 0.033657376 0.034108251 0.035800669 0.037062774 0.037503899 0.039551770 0.040052785 0.040748836 0.041047729 0.042518467 0.044671312 0.045439493 0.047118218 0.047979578 0.049267686 0.050487511 0.051027687 0.051236320 0.051591464 0.052487088 0.052696564 0.052927024 0.053113136 0.054741057 0.054949548 0.056042179 0.056275543 0.056558936 0.056723463 0.057224257 0.059155054 0.060564720 0.061013772 0.061723736 0.062383091 0.063322998 0.064523764 0.065327398 0.065986237 0.066578231 0.068366320 0.069076431 0.070282650 0.072747375 0.074387292 0.074790625 0.076523354 0.078542360 0.084189181 0.086748969 0.087140084 0.087627122 0.089290312 0.090567630 0.091461143 0.094049890 0.094887181 0.095796344 0.096430432 0.097852418 0.098831692 0.099385007 0.100198710 0.100934398 0.102480285 0.103212753 0.103612468 0.104375988 0.104578342 0.106348291 0.106983967 0.108169008 0.109791913 0.111049711 0.112403830 0.113480763 0.115034809 0.116221405 0.116822866 0.118711927 0.120807951 0.122332602 0.123180156 0.124595753 0.126188709 0.126303015 0.126656140 0.127259753 0.132052534 0.135081823 0.135830646 0.142818138 0.143825192 0.147079950 0.147563825 0.149754712 0.152238213 0.154664773 0.155196856 0.156635259 0.161519954 0.161904289 0.173766763 0.174264524 0.181441783 0.184867252 0.186412016 0.189625233 0.190403603 0.194168203 0.195392351 0.198695889 0.200299268 0.205256800 0.207018556 0.207379374 0.210237473 0.216429886 0.216769752 0.217964100 0.219199452 0.220828070 0.225278658 0.226706838 0.232307328 0.235122931 0.235707907 0.235996521 0.244687278 0.256081980 0.257268514 0.263899629 0.269951339 0.280735228 0.283340549 0.286334562 0.291909611 0.296972563 0.304409293 0.305805394 0.307321716 0.314422564 0.316763564 0.317402501 0.322233377 0.330108798 0.332849157 0.351823161 0.352709118 0.355097632 0.355858556 0.360079216 0.363039870 0.364296081 0.384176283 0.386043569 0.392192131 0.410595401 0.425979312 0.431031982 0.462439200 0.469139102 0.478645717 0.484251616 0.484494203 0.487583801 0.491473707 0.509641018 0.515607781 0.535440439 0.569277962 0.575166037 0.591747773 0.594073204 0.607308317 0.608407613 0.644703112 0.647590605 0.649718686 0.674346803 0.678427557 0.686148132 0.692011678 0.693626377 0.700036001 0.704654119 0.718270466 0.742269306 0.751418826 0.759438684 0.769990069 0.773226917 0.779585956 0.811003962 0.815762846 0.819919093 0.822884419 0.823602106 0.831749861 0.834979078 0.837842023 0.842532475 0.845885318 0.847550810 0.849912671 0.859298776 0.865946473 0.867289785 0.874277444 0.885990344 0.886314235 0.889721722 0.899980872 0.901088760 0.904127135 0.923825127 0.928023165 0.936514850 0.937803814 0.966212240 0.976408772 0.986781184 1.001712138 1.020252095 1.028433453 1.042075874 1.051041607 1.057672379 1.068857661 1.086909424 1.088779227 1.104734060 1.108099774 1.112547403 1.126180537 1.135984960 1.140470039 1.144681586 1.176409075 1.179066640 1.181803806 1.187032819 1.191599335 1.197729352 1.224717565 1.228361051 1.274337677 1.302757104 1.321358416 1.328408889 1.333201605 1.336482916 1.338143695 1.342438060 1.343323637 1.345033365 1.359305962 1.379333809 1.383099207 1.385730207 1.410823054 1.420499457 1.432083044 1.551493911 1.684982712 1.776137690</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">272</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34607424" y3="0.04594254" z3="-0.19752601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39455958" y3="0.15496626" z3="0.40456209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65363168" y3="0.43248927" z3="-0.35136486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73119697" y3="1.2347876" z3="-2.26401266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39246786" y3="0.43277251" z3="-1.18666633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72987398" y3="0.84608174" z3="-3.66122722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6349522" y3="1.74814664" z3="-3.13403145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37809782" y3="2.59202894" z3="-4.60684673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56074163" y3="1.25042283" z3="-4.37117547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49735324" y3="2.9278313" z3="-5.16306308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9267926" y3="-0.48427884" z3="-3.44172902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10219935" y3="0.04475868" z3="-1.00179703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4024644" y3="-1.09711883" z3="-2.00138701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93127693" y3="-0.96367017" z3="-1.82750913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10233077" y3="-2.42288387" z3="-1.84769683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14376965" y3="-3.61852483" z3="0.67774129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01596431" y3="-5.24748196" z3="-4.74218774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24395467" y3="-4.99394028" z3="-3.70338678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8415194" y3="-4.31161902" z3="-1.08160019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78018849" y3="-4.58337852" z3="-2.85188601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55911021" y3="-5.09031921" z3="-3.24374603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85860918" y3="-4.74435331" z3="-1.92841753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49346184" y3="-4.25698903" z3="-1.52479701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81171005" y3="-4.4960848" z3="-3.19969372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35816454" y3="-5.40516334" z3="-3.9189912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89431851" y3="-4.78902176" z3="-1.58357988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03176175" y3="-3.86409141" z3="0.23951485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17265388" y3="-3.64979822" z3="0.88304155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06012419" y3="-4.11291745" z3="0.44927242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16922344" y3="-3.5119403" z3="2.3497495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2299476" y3="-3.32261785" z3="5.1471995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36588489" y3="-3.71674602" z3="3.05217305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0029326" y3="-3.21811996" z3="3.07205866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03072548" y3="-3.12380095" z3="4.46044268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39517257" y3="-3.62456823" z3="4.44091943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28044794" y3="-3.95788045" z3="2.50327686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04254736" y3="-3.08482766" z3="2.5682245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10197255" y3="-2.91537357" z3="4.99935057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33325847" y3="-3.79622526" z3="4.97542553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25109825" y3="-3.25726469" z3="6.23863938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41346143" y3="-3.88971696" z3="-0.62153848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1724429" y3="-3.38743403" z3="-1.07521994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52267412" y3="0.24388801" z3="-4.71125647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07858649" y3="-1.72491504" z3="0.02033198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90644004" y3="-0.97335355" z3="1.18185098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84539138" y3="-0.32394268" z3="1.51865965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37228428" y3="0.55366136" z3="1.22258936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45313822" y3="1.45459786" z3="-0.40291737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98364719" y3="-0.69835826" z3="1.40038159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36366356" y3="1.74423941" z3="2.66888325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88436576" y3="-0.96224035" z3="2.07631925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6600417" y3="-0.34654519" z3="3.3347532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20668394" y3="0.76704979" z3="-1.23003369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31437573" y3="2.25131868" z3="-0.3956252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43668507" y3="1.92945387" z3="-0.56557378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01533083" y3="-1.06039791" z3="2.4412295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95568083" y3="-0.23428007" z3="1.15925863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86001506" y3="-1.54253893" z3="0.70273802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41664431" y3="1.20330047" z3="3.63024873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56995224" y3="2.33592319" z3="2.66713313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20908176" y3="2.45333118" z3="2.62084157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80091017" y3="-0.80366393" z3="3.85152754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57774165" y3="-0.51791364" z3="3.91285418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48675077" y3="0.73538065" z3="3.21345093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8466191" y3="-0.70827223" z3="0.98702958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41740882" y3="-2.0344552" z3="0.85085696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76298519" y3="-2.67662606" z3="1.89476997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55446784" y3="-1.97975463" z3="3.08122359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03652719" y3="-0.6886519" z3="3.27418848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69111349" y3="-0.05999381" z3="2.21963512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51989122" y3="-2.53412127" z3="-0.11480895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36394417" y3="-3.68432306" z3="1.77304403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68942638" y3="-2.57432832" z3="4.10523865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85471431" y3="-0.17594197" z3="4.21924224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03670019" y3="0.97117007" z3="2.33322832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79453653" y3="0.46063205" z3="-4.28555877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77234308" y3="-0.50865473" z3="-4.46591109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42227834" y3="-1.69833623" z3="-5.09305914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13567996" y3="-1.9252739" z3="-5.5722771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8349156" y3="-0.95286924" z3="-5.37102812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04078868" y3="1.38206878" z3="-3.75183809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79124376" y3="-0.3655413" z3="-4.10523399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43195683" y3="-2.74952745" z3="-5.23551531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09642825" y3="-2.86396499" z3="-6.07563435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85664516" y3="-1.13591782" z3="-5.70715572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36095834" y3="-1.87727502" z3="5.04591119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30966061" y3="-3.71472879" z3="3.9385904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20635053" y3="-3.65002349" z3="-6.0152733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43454661" y3="-2.66645017" z3="-4.55475596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07666676" y3="1.15497466" z3="-1.50044171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11415694" y3="1.54932645" z3="-2.47492966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44588341" y3="1.48032392" z3="-1.7023982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8541266" y3="2.14785084" z3="-2.83123348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17389462" y3="1.17785224" z3="-0.94332079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91089723" y3="2.38701811" z3="-2.97854998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57253268" y3="2.22186006" z3="-3.64233864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90438894" y3="2.51209491" z3="-3.81561924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84951339" y3="2.4985045" z3="-4.41317087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23427943" y3="3.02333368" z3="-4.72480523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40189963" y3="3.15215598" z3="-3.32693215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28362443" y3="3.56535018" z3="-4.10959626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20962153" y3="4.16258995" z3="-2.73208628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95548785" y3="5.49577071" z3="-2.949892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04101761" y3="3.87277361" z3="-2.08754176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59211884" y3="6.25120453" z3="-2.47996257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05486533" y3="4.95210144" z3="-4.32846316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87520509" y3="5.90020989" z3="-3.76962471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20076469" y3="5.25062542" z3="-4.94430781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68821026" y3="6.96372014" z3="-3.94204636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47622711" y3="-2.20219339" z3="-0.30222801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44550446" y3="-2.99576336" z3="-1.06879504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00779815" y3="-2.58307483" z3="0.58517772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08902691" y3="-1.38211804" z3="-0.72216974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17107526" y3="-1.42961256" z3="-1.14712794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30705047" y3="-0.38895785" z3="-1.4963649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09574291" y3="-1.55313488" z3="-0.93765322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40813164" y3="-2.08503159" z3="-1.99868541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3461,.0459,-.1975;7.3946,.155,.4046;6.6536,.4325,-.3514;4.7312,1.2348,-2.264;4.3925,.4328,-1.1867;2.7299,.8461,-3.6612;3.635,1.7481,-3.134;1.3781,2.592,-4.6068;1.5607,1.2504,-4.3712;.4974,2.9278,-5.1631;2.9268,-.4843,-3.4417;3.1022,.0448,-1.0018;2.4025,-1.0971,-2.0014;.9313,-.9637,-1.8275;3.1023,-2.4229,-1.8477;-.1438,-3.6185,.6777;-.016,-5.2475,-4.7422;-.244,-4.9939,-3.7034;-.8415,-4.3116,-1.0816;.7802,-4.5834,-2.8519;-1.5591,-5.0903,-3.2437;-1.8586,-4.7444,-1.9284;.4935,-4.257,-1.5248;1.8117,-4.4961,-3.1997;-2.3582,-5.4052,-3.919;-2.8943,-4.789,-1.5836;-1.0318,-3.8641,.2395;-2.1727,-3.6498,.883;-3.0601,-4.1129,.4493;-2.1692,-3.5119,2.3497;-2.2299,-3.3226,5.1472;-3.3659,-3.7167,3.0522;-1.0029,-3.2181,3.0721;-1.0307,-3.1238,4.4604;-3.3952,-3.6246,4.4409;-4.2804,-3.9579,2.5033;-.0425,-3.0848,2.5682;-.102,-2.9154,4.9994;-4.3333,-3.7962,4.9754;-2.2511,-3.2573,6.2386;1.4135,-3.8897,-.6215;2.1724,-3.3874,-1.0752;.5227,.2439,-4.7113;-3.0786,-1.7249,.0203;-2.9064,-.9734,1.1819;-1.8454,-.3239,1.5187;-.3723,.5537,1.2226;-.4531,1.4546,-.4029;.9836,-.6984,1.4004;-.3637,1.7442,2.6689;-3.8844,-.9622,2.0763;-3.66,-.3465,3.3348;-.2067,.767,-1.23;.3144,2.2513,-.3956;-1.4367,1.9295,-.5656;1.0153,-1.0604,2.4412;1.9557,-.2343,1.1593;.86,-1.5425,.7027;-.4166,1.2033,3.6302;.57,2.3359,2.6671;-1.2091,2.4533,2.6208;-2.8009,-.8037,3.8515;-4.5777,-.5179,3.9129;-3.4868,.7354,3.2135;4.8466,-.7083,.987;4.4174,-2.0345,.8509;3.763,-2.6766,1.8948;3.5545,-1.9798,3.0812;4.0365,-.6887,3.2742;4.6911,-.06,2.2196;4.5199,-2.5341,-.1148;3.3639,-3.6843,1.773;2.6894,-2.5743,4.1052;3.8547,-.1759,4.2192;5.0367,.9712,2.3332;-.7945,.4606,-4.2856;-1.7723,-.5087,-4.4659;-1.4223,-1.6983,-5.0931;-.1357,-1.9253,-5.5723;.8349,-.9529,-5.371;-1.0408,1.3821,-3.7518;-2.7912,-.3655,-4.1052;-2.432,-2.7495,-5.2355;.0964,-2.864,-6.0756;1.8566,-1.1359,-5.7072;2.361,-1.8773,5.0459;2.3097,-3.7147,3.9386;-2.2064,-3.65,-6.0153;-3.4345,-2.6665,-4.5548;7.0767,1.155,-1.5004;6.1142,1.5493,-2.4749;8.4459,1.4803,-1.7024;8.8541,2.1479,-2.8312;9.1739,1.1779,-.9433;9.9109,2.387,-2.9785;6.5725,2.2219,-3.6423;7.9044,2.5121,-3.8156;5.8495,2.4985,-4.4132;8.2343,3.0233,-4.7248;3.4019,3.1522,-3.3269;2.2836,3.5654,-4.1096;4.2096,4.1626,-2.7321;3.9555,5.4958,-2.9499;5.041,3.8728,-2.0875;4.5921,6.2512,-2.48;2.0549,4.9521,-4.3285;2.8752,5.9002,-3.7696;1.2008,5.2506,-4.9443;2.6882,6.9637,-3.942;-4.4762,-2.2022,-.3022;-4.4455,-2.9958,-1.0688;-5.0078,-2.5831,.5852;-5.089,-1.3821,-.7222;-2.1711,-1.4296,-1.1471;-2.3071,-.389,-1.4964;-1.0957,-1.5531,-.9377;-2.4081,-2.085,-1.9987;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420632830</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001074198330 0.000207771329 0.025824700538 0.005321800106</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030694014 -0.000276216 0.000029603 0.000193410 0.000216531 0.000358686 0.000425189 0.000586210 0.000764297 0.000861844 0.001009677 0.001055884 0.001232142 0.001361093 0.001412613 0.001434861 0.001561367 0.001687747 0.001804314 0.001892334 0.002167793 0.002335420 0.002435045 0.002571713 0.002672442 0.002998857 0.003084878 0.003395087 0.003511160 0.003923411 0.004451399 0.004674746 0.004747383 0.005088946 0.006059425 0.006081737 0.006294351 0.006650110 0.006936028 0.007709440 0.008104866 0.008175390 0.008376496 0.009350713 0.009934240 0.010140400 0.010668051 0.011107151 0.011906004 0.012144152 0.012927697 0.013066871 0.014166233 0.014596565 0.015336235 0.015523949 0.015919367 0.016471448 0.016812276 0.017506257 0.018129547 0.018603673 0.019439579 0.019572970 0.020098400 0.020714004 0.021240745 0.021388237 0.022446873 0.023137856 0.024202586 0.026393670 0.026806764 0.027685774 0.027832803 0.029548720 0.030326146 0.031612694 0.033294358 0.033657986 0.034108679 0.035800989 0.037069953 0.037502816 0.039550223 0.040056158 0.040746884 0.041048488 0.042529861 0.044672043 0.045451735 0.047118267 0.047982451 0.049267763 0.050489091 0.051032202 0.051236327 0.051596159 0.052487221 0.052696635 0.052927358 0.053113121 0.054741615 0.054951701 0.056042330 0.056275548 0.056562346 0.056732194 0.057224297 0.059162839 0.060564212 0.061019949 0.061724963 0.062384777 0.063326806 0.064524493 0.065327521 0.065988486 0.066587982 0.068369578 0.069079208 0.070283031 0.072749064 0.074393617 0.074790638 0.076523044 0.078560661 0.084201461 0.086762551 0.087140314 0.087627022 0.089299651 0.090570279 0.091464266 0.094048371 0.094905571 0.095798604 0.096433012 0.097852386 0.098831699 0.099395146 0.100198778 0.100934289 0.102480425 0.103212767 0.103614889 0.104376187 0.104578656 0.106349506 0.106984984 0.108169333 0.109800547 0.111056007 0.112416090 0.113503997 0.115034620 0.116230876 0.116823565 0.118715335 0.120820449 0.122346010 0.123180990 0.124600326 0.126189010 0.126304780 0.126656686 0.127269119 0.132053540 0.135082567 0.135831778 0.142821165 0.143839668 0.147080091 0.147564971 0.149755280 0.152255415 0.154666487 0.155202488 0.156637748 0.161522874 0.161904658 0.173766933 0.174264435 0.181475146 0.184868754 0.186416854 0.189628930 0.190405651 0.194170862 0.195392763 0.198697592 0.200299576 0.205260245 0.207027216 0.207381041 0.210240674 0.216429505 0.216790264 0.217967377 0.219203832 0.220830869 0.225283708 0.226708729 0.232321159 0.235124665 0.235707906 0.235996577 0.244687244 0.256082487 0.257272181 0.263912962 0.269952390 0.280736245 0.283340444 0.286335050 0.291910267 0.296979159 0.304410899 0.305810222 0.307321824 0.314432134 0.316768313 0.317404999 0.322234377 0.330108857 0.332849726 0.351824241 0.352726583 0.355097698 0.355859730 0.360079597 0.363040224 0.364302404 0.384177674 0.386046483 0.392195982 0.410601605 0.425985374 0.431068967 0.462447795 0.469139493 0.478664153 0.484271296 0.484494409 0.487585645 0.491476477 0.509643556 0.515607825 0.535440920 0.569281639 0.575178441 0.591750820 0.594075817 0.607317967 0.608408469 0.644726449 0.647592611 0.649731407 0.674349633 0.678428831 0.686173685 0.692013352 0.693629182 0.700037096 0.704681922 0.718279490 0.742269849 0.751422564 0.759439020 0.770102101 0.773242789 0.779591829 0.811005091 0.815829018 0.819920892 0.822900457 0.823609613 0.831755406 0.834985323 0.837844793 0.842550787 0.845893999 0.847551228 0.849950594 0.859304761 0.865946610 0.867307233 0.874309353 0.886008721 0.886318691 0.889721773 0.900001373 0.901089803 0.904127269 0.923835989 0.928032385 0.936524315 0.937809255 0.966217023 0.976409823 0.986792292 1.001712236 1.020256649 1.028468131 1.042075805 1.051042681 1.057674542 1.068857802 1.086915805 1.088784337 1.104742841 1.108100031 1.112555712 1.126195542 1.135984957 1.140483798 1.144682924 1.176423219 1.179080375 1.181804498 1.187034705 1.191599871 1.197779558 1.224722140 1.228373228 1.274383672 1.302769146 1.321365960 1.328410050 1.333205395 1.336484156 1.338145086 1.342439604 1.343325257 1.345033846 1.359306028 1.379336773 1.383148046 1.385731202 1.410941855 1.420507927 1.432100901 1.551494220 1.685044704 1.776140227</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">273</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34666348" y3="0.04304239" z3="-0.19799974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39501479" y3="0.15321118" z3="0.40593424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65439992" y3="0.43050192" z3="-0.350554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73301089" y3="1.23343758" z3="-2.26419713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39366036" y3="0.43060457" z3="-1.18745642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73074221" y3="0.84741258" z3="-3.66146669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63682213" y3="1.74849719" z3="-3.13348557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3811885" y3="2.59488685" z3="-4.6070093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56188615" y3="1.25315888" z3="-4.37146249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50105855" y3="2.93187275" z3="-5.16342877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92632898" y3="-0.48342196" z3="-3.44312046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10311444" y3="0.04314947" z3="-1.00288005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4024119" y3="-1.09740138" z3="-2.00314598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93137163" y3="-0.96379468" z3="-1.82790909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10193397" y3="-2.42365171" z3="-1.85163187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14296903" y3="-3.6198718" z3="0.67622226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01964451" y3="-5.24653074" z3="-4.74386747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24703861" y3="-4.99334685" z3="-3.70485107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84185907" y3="-4.313142" z3="-1.08244235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7774659" y3="-4.58180369" z3="-2.85445816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56112332" y3="-5.09193521" z3="-3.24395596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8593981" y3="-4.7467001" z3="-1.92815067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4922009" y3="-4.25652631" z3="-1.52683693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80942216" y3="-4.49566918" z3="-3.20397381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35924816" y3="-5.40870827" z3="-3.91826739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89497813" y3="-4.79131916" z3="-1.58196444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0310629" y3="-3.8660626" z3="0.23880124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17158146" y3="-3.65194028" z3="0.88348496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05898532" y3="-4.11719878" z3="0.45181889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16535735" y3="-3.51361849" z3="2.35035218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2207246" y3="-3.32409895" z3="5.14801348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35950126" y3="-3.72370548" z3="3.05560282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99894771" y3="-3.2135715" z3="3.06991055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02377502" y3="-3.11989424" z3="4.4584832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38641447" y3="-3.63102781" z3="4.44436635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27375076" y3="-3.96996774" z3="2.5089372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04180612" y3="-3.07263175" z3="2.56363354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09521657" y3="-2.90670921" z3="4.99552068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32312144" y3="-3.80595677" z3="4.98109414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23971351" y3="-3.2587549" z3="6.23949952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41186543" y3="-3.88830929" z3="-0.62433952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17191453" y3="-3.38740179" z3="-1.07906864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52255518" y3="0.24754167" z3="-4.71159704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08014946" y3="-1.72988672" z3="0.0212724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90718711" y3="-0.97818789" z3="1.18278367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84484244" y3="-0.32957062" z3="1.51807465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37945429" y3="0.55972475" z3="1.22035448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46461737" y3="1.45252897" z3="-0.40943126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98472684" y3="-0.68267799" z3="1.40466374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38291157" y3="1.75765484" z3="2.6608384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88398389" y3="-0.96759687" z3="2.07855628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65881491" y3="-0.35198125" z3="3.33683471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2102037" y3="0.76293966" z3="-1.23295579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29445401" y3="2.25705046" z3="-0.40403599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45262567" y3="1.91796255" z3="-0.57658918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01725731" y3="-1.04183928" z3="2.44689419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95349007" y3="-0.21371542" z3="1.1628671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86554023" y3="-1.52978572" z3="0.70944651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43286854" y3="1.22124989" z3="3.62507785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54498204" y3="2.35834584" z3="2.65775166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23490646" y3="2.45906399" z3="2.60742557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79849694" y3="-0.80763433" z3="3.85244172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57541347" y3="-0.52483943" z3="3.91622742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48760408" y3="0.73001308" z3="3.21534282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84639382" y3="-0.71143752" z3="0.98601782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41104522" y3="-2.03556447" z3="0.84839938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75617213" y3="-2.67684192" z3="1.89248907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55401104" y3="-1.98131491" z3="3.08098001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04238522" y3="-0.69256757" z3="3.27541275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69653957" y3="-0.06475418" z3="2.22006228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51214519" y3="-2.53498865" z3="-0.11598834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35239601" y3="-3.68277453" z3="1.76960332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69001644" y3="-2.5747754" z3="4.10637695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86586533" y3="-0.1809081" z3="4.2222265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04700822" y3="0.96471518" z3="2.33466348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79463682" y3="0.46466032" z3="-4.285274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7728284" y3="-0.50460996" z3="-4.46345581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42345653" y3="-1.69467633" z3="-5.09179078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13719158" y3="-1.92211343" z3="-5.5713472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83392658" y3="-0.94951564" z3="-5.37025165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0406921" y3="1.38640482" z3="-3.75154628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79136089" y3="-0.36129732" z3="-4.1014356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43329292" y3="-2.74593693" z3="-5.23158048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09436923" y3="-2.86109309" z3="-6.07413132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85597213" y3="-1.13244714" z3="-5.7068779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36241301" y3="-1.87676648" z3="5.04593889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30953133" y3="-3.71508099" z3="3.9413625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20808378" y3="-3.64688931" z3="-6.01098423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43596571" y3="-2.66324713" z3="-4.5498721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07798562" y3="1.15241135" z3="-1.49938712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11599206" y3="1.54654561" z3="-2.47466019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44735463" y3="1.47738026" z3="-1.70003427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85659238" y3="2.14428481" z3="-2.82849756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1746737" y3="1.17504571" z3="-0.94021051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91362329" y3="2.38379216" z3="-2.97468292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57523787" y3="2.21759442" z3="-3.64181137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90755601" y3="2.50841669" z3="-3.813645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85296835" y3="2.49440805" z3="-4.41330637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23823355" y3="3.01848097" z3="-4.72257974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40548148" y3="3.15264945" z3="-3.32605582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28793054" y3="3.5671262" z3="-4.10907439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21463272" y3="4.16151429" z3="-2.73109166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96217464" y3="5.49519602" z3="-2.94833611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04552756" y3="3.87034791" z3="-2.08653051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60021749" y3="6.24902773" z3="-2.47888743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0616723" y3="4.95367397" z3="-4.32837036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88271486" y3="5.90107631" z3="-3.76837823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20843249" y3="5.25318534" z3="-4.94479925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69683846" y3="6.96499416" z3="-3.94040186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47719461" y3="-2.20836052" z3="-0.30093253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44441532" y3="-2.99897602" z3="-1.06904034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00690432" y3="-2.59298015" z3="0.58492949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09212089" y3="-1.38861216" z3="-0.71861915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17427283" y3="-1.43295402" z3="-1.14730505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31360742" y3="-0.39396175" z3="-1.49718166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09752396" y3="-1.55524693" z3="-0.93979948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4110042" y3="-2.0890356" z3="-1.99834227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3467,.043,-.198;7.395,.1532,.4059;6.6544,.4305,-.3506;4.733,1.2334,-2.2642;4.3937,.4306,-1.1875;2.7307,.8474,-3.6615;3.6368,1.7485,-3.1335;1.3812,2.5949,-4.607;1.5619,1.2532,-4.3715;.5011,2.9319,-5.1634;2.9263,-.4834,-3.4431;3.1031,.0431,-1.0029;2.4024,-1.0974,-2.0031;.9314,-.9638,-1.8279;3.1019,-2.4237,-1.8516;-.143,-3.6199,.6762;-.0196,-5.2465,-4.7439;-.247,-4.9933,-3.7049;-.8419,-4.3131,-1.0824;.7775,-4.5818,-2.8545;-1.5611,-5.0919,-3.244;-1.8594,-4.7467,-1.9282;.4922,-4.2565,-1.5268;1.8094,-4.4957,-3.204;-2.3592,-5.4087,-3.9183;-2.895,-4.7913,-1.582;-1.0311,-3.8661,.2388;-2.1716,-3.6519,.8835;-3.059,-4.1172,.4518;-2.1654,-3.5136,2.3504;-2.2207,-3.3241,5.148;-3.3595,-3.7237,3.0556;-.9989,-3.2136,3.0699;-1.0238,-3.1199,4.4585;-3.3864,-3.631,4.4444;-4.2738,-3.97,2.5089;-.0418,-3.0726,2.5636;-.0952,-2.9067,4.9955;-4.3231,-3.806,4.9811;-2.2397,-3.2588,6.2395;1.4119,-3.8883,-.6243;2.1719,-3.3874,-1.0791;.5226,.2475,-4.7116;-3.0801,-1.7299,.0213;-2.9072,-.9782,1.1828;-1.8448,-.3296,1.5181;-.3795,.5597,1.2204;-.4646,1.4525,-.4094;.9847,-.6827,1.4047;-.3829,1.7577,2.6608;-3.884,-.9676,2.0786;-3.6588,-.352,3.3368;-.2102,.7629,-1.233;.2945,2.2571,-.404;-1.4526,1.918,-.5766;1.0173,-1.0418,2.4469;1.9535,-.2137,1.1629;.8655,-1.5298,.7094;-.4329,1.2212,3.6251;.545,2.3583,2.6578;-1.2349,2.4591,2.6074;-2.7985,-.8076,3.8524;-4.5754,-.5248,3.9162;-3.4876,.73,3.2153;4.8464,-.7114,.986;4.411,-2.0356,.8484;3.7562,-2.6768,1.8925;3.554,-1.9813,3.081;4.0424,-.6926,3.2754;4.6965,-.0648,2.2201;4.5121,-2.535,-.116;3.3524,-3.6828,1.7696;2.69,-2.5748,4.1064;3.8659,-.1809,4.2222;5.047,.9647,2.3347;-.7946,.4647,-4.2853;-1.7728,-.5046,-4.4635;-1.4235,-1.6947,-5.0918;-.1372,-1.9221,-5.5713;.8339,-.9495,-5.3703;-1.0407,1.3864,-3.7515;-2.7914,-.3613,-4.1014;-2.4333,-2.7459,-5.2316;.0944,-2.8611,-6.0741;1.856,-1.1324,-5.7069;2.3624,-1.8768,5.0459;2.3095,-3.7151,3.9414;-2.2081,-3.6469,-6.011;-3.436,-2.6632,-4.5499;7.078,1.1524,-1.4994;6.116,1.5465,-2.4747;8.4474,1.4774,-1.7;8.8566,2.1443,-2.8285;9.1747,1.175,-.9402;9.9136,2.3838,-2.9747;6.5752,2.2176,-3.6418;7.9076,2.5084,-3.8136;5.853,2.4944,-4.4133;8.2382,3.0185,-4.7226;3.4055,3.1526,-3.3261;2.2879,3.5671,-4.1091;4.2146,4.1615,-2.7311;3.9622,5.4952,-2.9483;5.0455,3.8703,-2.0865;4.6002,6.249,-2.4789;2.0617,4.9537,-4.3284;2.8827,5.9011,-3.7684;1.2084,5.2532,-4.9448;2.6968,6.965,-3.9404;-4.4772,-2.2084,-.3009;-4.4444,-2.999,-1.069;-5.0069,-2.593,.5849;-5.0921,-1.3886,-.7186;-2.1743,-1.433,-1.1473;-2.3136,-.394,-1.4972;-1.0975,-1.5552,-.9398;-2.411,-2.089,-1.9983;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418251629</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001096232967 0.000213840605 0.018287048074 0.005340419268</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030695256 -0.000192279 0.000033002 0.000183167 0.000215041 0.000360304 0.000424820 0.000585446 0.000764406 0.000862049 0.001009005 0.001057579 0.001232486 0.001363102 0.001412118 0.001439528 0.001561613 0.001688157 0.001804398 0.001892053 0.002167891 0.002337775 0.002435560 0.002573479 0.002674628 0.003000556 0.003087526 0.003395486 0.003513177 0.003923885 0.004452866 0.004678896 0.004748821 0.005088859 0.006063074 0.006088017 0.006300861 0.006650221 0.006940317 0.007712986 0.008105792 0.008177661 0.008376479 0.009351246 0.009934288 0.010142751 0.010671536 0.011107727 0.011915167 0.012143783 0.012930139 0.013077726 0.014169506 0.014597604 0.015339313 0.015524996 0.015928812 0.016493398 0.016819581 0.017510799 0.018130006 0.018616765 0.019442124 0.019574926 0.020101245 0.020717963 0.021245038 0.021392832 0.022447275 0.023137937 0.024202689 0.026399277 0.026811051 0.027700201 0.027832714 0.029550112 0.030328184 0.031612909 0.033294463 0.033658533 0.034109801 0.035801221 0.037074486 0.037504468 0.039550895 0.040057952 0.040747529 0.041051011 0.042536135 0.044673105 0.045466422 0.047118666 0.047986184 0.049267830 0.050489214 0.051038946 0.051236421 0.051599197 0.052487324 0.052696653 0.052927944 0.053113144 0.054741814 0.054954702 0.056042665 0.056275548 0.056564217 0.056743355 0.057224351 0.059166881 0.060565266 0.061024439 0.061725713 0.062386567 0.063331232 0.064525739 0.065328128 0.065990308 0.066595349 0.068370958 0.069082288 0.070283114 0.072750182 0.074398421 0.074790686 0.076523023 0.078578534 0.084212142 0.086773268 0.087140602 0.087627497 0.089305911 0.090573884 0.091470970 0.094048413 0.094919445 0.095799299 0.096436422 0.097852371 0.098832016 0.099407153 0.100199548 0.100934337 0.102482030 0.103213117 0.103617364 0.104376250 0.104579077 0.106349802 0.106987133 0.108169400 0.109810340 0.111058060 0.112420814 0.113510589 0.115034645 0.116239587 0.116825145 0.118717076 0.120836707 0.122357269 0.123182225 0.124609174 0.126190164 0.126305834 0.126657972 0.127274001 0.132053744 0.135083150 0.135832373 0.142824223 0.143847154 0.147080040 0.147565662 0.149755156 0.152275882 0.154670403 0.155209342 0.156638913 0.161527108 0.161907596 0.173767254 0.174264459 0.181500386 0.184870685 0.186422316 0.189632643 0.190406415 0.194171199 0.195392753 0.198698672 0.200299881 0.205271644 0.207033570 0.207381977 0.210243163 0.216431838 0.216823207 0.217968452 0.219213552 0.220836234 0.225289929 0.226709977 0.232331053 0.235126696 0.235707918 0.235996841 0.244687254 0.256083118 0.257275721 0.263929214 0.269953439 0.280736266 0.283340450 0.286336045 0.291911008 0.296980426 0.304412925 0.305815024 0.307321705 0.314443752 0.316772320 0.317406216 0.322234720 0.330109188 0.332850693 0.351829634 0.352735799 0.355098045 0.355862868 0.360079591 0.363042016 0.364304815 0.384180846 0.386050970 0.392199980 0.410605912 0.425987766 0.431104304 0.462453027 0.469141745 0.478680550 0.484289468 0.484496903 0.487586077 0.491477741 0.509647443 0.515608164 0.535442061 0.569283441 0.575186545 0.591753680 0.594079752 0.607342331 0.608414269 0.644742760 0.647595527 0.649737214 0.674353199 0.678431502 0.686195649 0.692016228 0.693643679 0.700037343 0.704700669 0.718288020 0.742270305 0.751424895 0.759439994 0.770213332 0.773265414 0.779599569 0.811005126 0.815898253 0.819921546 0.822917175 0.823622288 0.831757658 0.834988985 0.837846261 0.842558638 0.845904789 0.847559712 0.849977797 0.859314440 0.865946623 0.867341604 0.874344357 0.886039010 0.886324572 0.889721843 0.900036308 0.901093287 0.904127270 0.923847974 0.928035144 0.936529939 0.937813042 0.966221149 0.976409908 0.986795598 1.001713586 1.020260683 1.028506670 1.042075809 1.051042671 1.057677977 1.068857869 1.086920941 1.088789597 1.104752003 1.108101490 1.112563969 1.126242424 1.135984965 1.140489993 1.144685820 1.176438193 1.179094323 1.181804856 1.187037872 1.191599966 1.197810693 1.224725310 1.228388015 1.274428401 1.302778230 1.321374775 1.328410848 1.333205444 1.336484704 1.338145048 1.342441795 1.343330200 1.345034671 1.359306077 1.379347392 1.383197760 1.385731435 1.410973694 1.420515609 1.432103253 1.551494620 1.685058747 1.776149281</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">274</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34215947" y3="0.04539783" z3="-0.19382709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38857659" y3="0.15783192" z3="0.41454387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64957406" y3="0.43348576" z3="-0.34401103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73175446" y3="1.23198278" z3="-2.26304579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39073802" y3="0.43083338" z3="-1.18574314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73040684" y3="0.84656404" z3="-3.66203826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63760758" y3="1.74674011" z3="-3.13497923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38506641" y3="2.59497031" z3="-4.61233297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5629075" y3="1.25324696" z3="-4.37343041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50601579" y3="2.93262752" z3="-5.17007783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92390842" y3="-0.48415214" z3="-3.44266571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10008251" y3="0.04330279" z3="-1.00277558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40066497" y3="-1.09823793" z3="-2.00268152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92950999" y3="-0.96660808" z3="-1.826891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10179559" y3="-2.42366327" z3="-1.85149483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13919024" y3="-3.61768436" z3="0.67195204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01748245" y3="-5.25132374" z3="-4.74615254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24452929" y3="-4.99641907" z3="-3.7074284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83947705" y3="-4.31138695" z3="-1.08579298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78085059" y3="-4.58760057" z3="-2.85649298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55975279" y3="-5.08942056" z3="-3.24729867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85791457" y3="-4.7419691" z3="-1.93208515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49535865" y3="-4.25978743" z3="-1.52945765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81247724" y3="-4.50318636" z3="-3.20471604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3598255" y3="-5.40279861" z3="-3.9220189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89349571" y3="-4.78372578" z3="-1.58705023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02782363" y3="-3.86371798" z3="0.23540483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16780281" y3="-3.65332829" z3="0.88172717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05458395" y3="-4.11974541" z3="0.45007028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16104547" y3="-3.516474" z3="2.34849699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21522365" y3="-3.33121668" z3="5.1461923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35419902" y3="-3.73064586" z3="3.05411731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9949462" y3="-3.21442316" z3="3.06760183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01948159" y3="-3.12256696" z3="4.45619055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3802636" y3="-3.6404366" z3="4.44301704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26865588" y3="-3.97770508" z3="2.50753277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03740654" y3="-3.07211702" z3="2.56061705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09102281" y3="-2.9084915" z3="4.99333353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31561456" y3="-3.81944083" z3="4.98005821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23351447" y3="-3.26769051" z3="6.23775017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41635784" y3="-3.89404346" z3="-0.62660957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17413414" y3="-3.39026263" z3="-1.08047988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52139162" y3="0.24920281" z3="-4.71085602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08235889" y3="-1.73128275" z3="0.02293621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90655422" y3="-0.98019733" z3="1.18419419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84497269" y3="-0.3289538" z3="1.51551225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38221114" y3="0.5646932" z3="1.21681903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46732433" y3="1.45280921" z3="-0.41565814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98458705" y3="-0.67377994" z3="1.40638927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.39199899" y3="1.76709345" z3="2.65319771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87973161" y3="-0.97267197" z3="2.0840099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65002324" y3="-0.35851522" z3="3.34235012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21173401" y3="0.76126952" z3="-1.23674316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29155153" y3="2.25770146" z3="-0.41203478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45531822" y3="1.91611672" z3="-0.58489991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0147526" y3="-1.03313549" z3="2.4485554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95454737" y3="-0.20438504" z3="1.16737853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86861059" y3="-1.52068072" z3="0.71077374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44271702" y3="1.2341462" z3="3.61921662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.53422726" y3="2.37011109" z3="2.65000768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.24564297" y3="2.46565547" z3="2.59514136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78576143" y3="-0.81285816" z3="3.85281442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56331527" y3="-0.53476177" z3="3.92626088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48213149" y3="0.72429222" z3="3.22199581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84159498" y3="-0.70973241" z3="0.98953407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40723962" y3="-2.03390945" z3="0.85006465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75391512" y3="-2.67762538" z3="1.89359924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5516003" y3="-1.98423393" z3="3.08306585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03842366" y3="-0.69539125" z3="3.27899056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69199352" y3="-0.06518282" z3="2.22473528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50573573" y3="-2.53075625" z3="-0.11741567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35178836" y3="-3.68384204" z3="1.76978974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6901731" y3="-2.58079387" z3="4.10878281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86144928" y3="-0.18561626" z3="4.22645715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04177146" y3="0.9642863" z3="2.34106672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79467892" y3="0.47069652" z3="-4.2841222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77548516" y3="-0.49645869" z3="-4.46099646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42962665" y3="-1.68854965" z3="-5.08572126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14437593" y3="-1.92009849" z3="-5.56612916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82929265" y3="-0.9499526" z3="-5.36861362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03769443" y3="1.39420722" z3="-3.75253937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79343179" y3="-0.34957115" z3="-4.09943249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44245179" y3="-2.73722302" z3="-5.22450884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08448393" y3="-2.86061239" z3="-6.06776886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84998049" y3="-1.13674514" z3="-5.70560808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36272411" y3="-1.88450049" z3="5.05030967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3126373" y3="-3.72193744" z3="3.9431722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2218957" y3="-3.63842576" z3="-6.00497344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44256765" y3="-2.65150906" z3="-4.54025009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07520233" y3="1.15457647" z3="-1.49280487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11526208" y3="1.54595576" z3="-2.47102169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44463631" y3="1.48122592" z3="-1.69076684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85576479" y3="2.1465212" z3="-2.81974628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1703963" y3="1.18145694" z3="-0.92845649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9126957" y3="2.38690874" z3="-2.96392716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5766835" y3="2.21550233" z3="-3.63871247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90877993" y3="2.50671185" z3="-3.80831053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85576185" y3="2.48916367" z3="-4.41262054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24103477" y3="3.01549218" z3="-4.71779304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40910263" y3="3.15110297" z3="-3.33095894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29358964" y3="3.56624514" z3="-4.11656513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21899955" y3="4.16026487" z3="-2.737089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97020703" y3="5.49375516" z3="-2.95921825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.047787" y3="3.86944762" z3="-2.08970791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60861062" y3="6.24805812" z3="-2.49009572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07037438" y3="4.9531814" z3="-4.33990178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89329086" y3="5.89986194" z3="-3.78250933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21863981" y3="5.25298193" z3="-4.95834889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71078018" y3="6.96356497" z3="-3.9586889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48027456" y3="-2.21211121" z3="-0.29320326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45128219" y3="-3.004014" z3="-1.06148444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00565421" y3="-2.59635881" z3="0.59643687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09810197" y3="-1.39323216" z3="-0.70816827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.180065" y3="-1.43289536" z3="-1.14788249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31879302" y3="-0.3917327" z3="-1.49457017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10388858" y3="-1.55513136" z3="-0.94217441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42003936" y3="-2.08694222" z3="-1.99962732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3422,.0454,-.1938;7.3886,.1578,.4145;6.6496,.4335,-.344;4.7318,1.232,-2.263;4.3907,.4308,-1.1857;2.7304,.8466,-3.662;3.6376,1.7467,-3.135;1.3851,2.595,-4.6123;1.5629,1.2532,-4.3734;.506,2.9326,-5.1701;2.9239,-.4842,-3.4427;3.1001,.0433,-1.0028;2.4007,-1.0982,-2.0027;.9295,-.9666,-1.8269;3.1018,-2.4237,-1.8515;-.1392,-3.6177,.672;-.0175,-5.2513,-4.7462;-.2445,-4.9964,-3.7074;-.8395,-4.3114,-1.0858;.7809,-4.5876,-2.8565;-1.5598,-5.0894,-3.2473;-1.8579,-4.742,-1.9321;.4954,-4.2598,-1.5295;1.8125,-4.5032,-3.2047;-2.3598,-5.4028,-3.922;-2.8935,-4.7837,-1.5871;-1.0278,-3.8637,.2354;-2.1678,-3.6533,.8817;-3.0546,-4.1197,.4501;-2.161,-3.5165,2.3485;-2.2152,-3.3312,5.1462;-3.3542,-3.7306,3.0541;-.9949,-3.2144,3.0676;-1.0195,-3.1226,4.4562;-3.3803,-3.6404,4.443;-4.2687,-3.9777,2.5075;-.0374,-3.0721,2.5606;-.091,-2.9085,4.9933;-4.3156,-3.8194,4.9801;-2.2335,-3.2677,6.2378;1.4164,-3.894,-.6266;2.1741,-3.3903,-1.0805;.5214,.2492,-4.7109;-3.0824,-1.7313,.0229;-2.9066,-.9802,1.1842;-1.845,-.329,1.5155;-.3822,.5647,1.2168;-.4673,1.4528,-.4157;.9846,-.6738,1.4064;-.392,1.7671,2.6532;-3.8797,-.9727,2.084;-3.65,-.3585,3.3424;-.2117,.7613,-1.2367;.2916,2.2577,-.412;-1.4553,1.9161,-.5849;1.0148,-1.0331,2.4486;1.9545,-.2044,1.1674;.8686,-1.5207,.7108;-.4427,1.2341,3.6192;.5342,2.3701,2.65;-1.2456,2.4657,2.5951;-2.7858,-.8129,3.8528;-4.5633,-.5348,3.9263;-3.4821,.7243,3.222;4.8416,-.7097,.9895;4.4072,-2.0339,.8501;3.7539,-2.6776,1.8936;3.5516,-1.9842,3.0831;4.0384,-.6954,3.279;4.692,-.0652,2.2247;4.5057,-2.5308,-.1174;3.3518,-3.6838,1.7698;2.6902,-2.5808,4.1088;3.8614,-.1856,4.2265;5.0418,.9643,2.3411;-.7947,.4707,-4.2841;-1.7755,-.4965,-4.461;-1.4296,-1.6885,-5.0857;-.1444,-1.9201,-5.5661;.8293,-.95,-5.3686;-1.0377,1.3942,-3.7525;-2.7934,-.3496,-4.0994;-2.4425,-2.7372,-5.2245;.0845,-2.8606,-6.0678;1.85,-1.1367,-5.7056;2.3627,-1.8845,5.0503;2.3126,-3.7219,3.9432;-2.2219,-3.6384,-6.005;-3.4426,-2.6515,-4.5403;7.0752,1.1546,-1.4928;6.1153,1.546,-2.471;8.4446,1.4812,-1.6908;8.8558,2.1465,-2.8197;9.1704,1.1815,-.9285;9.9127,2.3869,-2.9639;6.5767,2.2155,-3.6387;7.9088,2.5067,-3.8083;5.8558,2.4892,-4.4126;8.241,3.0155,-4.7178;3.4091,3.1511,-3.331;2.2936,3.5662,-4.1166;4.219,4.1603,-2.7371;3.9702,5.4938,-2.9592;5.0478,3.8694,-2.0897;4.6086,6.2481,-2.4901;2.0704,4.9532,-4.3399;2.8933,5.8999,-3.7825;1.2186,5.253,-4.9583;2.7108,6.9636,-3.9587;-4.4803,-2.2121,-.2932;-4.4513,-3.004,-1.0615;-5.0057,-2.5964,.5964;-5.0981,-1.3932,-.7082;-2.1801,-1.4329,-1.1479;-2.3188,-.3917,-1.4946;-1.1039,-1.5551,-.9422;-2.42,-2.0869,-1.9996;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650419772353</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001074130389 0.000201690619 0.024173037420 0.005342555990</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030696289 -0.000177883 0.000056277 0.000133387 0.000220328 0.000358932 0.000425824 0.000586763 0.000764634 0.000862156 0.001009807 0.001059096 0.001232492 0.001362917 0.001413719 0.001450798 0.001561597 0.001689737 0.001804372 0.001892711 0.002168532 0.002337276 0.002435310 0.002575242 0.002675965 0.003002719 0.003088915 0.003396144 0.003515924 0.003923907 0.004454923 0.004682086 0.004749180 0.005088828 0.006064236 0.006093224 0.006301183 0.006650067 0.006944961 0.007714352 0.008106277 0.008180084 0.008376691 0.009352341 0.009934319 0.010148096 0.010680983 0.011109086 0.011924980 0.012145009 0.012931130 0.013089713 0.014170189 0.014598329 0.015340078 0.015526991 0.015933220 0.016515453 0.016823136 0.017514562 0.018132057 0.018628496 0.019443827 0.019576908 0.020106864 0.020720944 0.021248413 0.021401641 0.022447516 0.023137956 0.024203053 0.026403390 0.026816604 0.027712593 0.027832717 0.029550795 0.030330253 0.031613163 0.033294906 0.033658721 0.034112705 0.035802079 0.037078908 0.037504746 0.039550815 0.040059622 0.040748338 0.041052825 0.042540878 0.044675798 0.045479109 0.047118954 0.047989422 0.049267820 0.050489568 0.051044040 0.051236485 0.051603248 0.052487532 0.052696666 0.052928610 0.053113392 0.054741914 0.054958207 0.056042850 0.056275559 0.056565004 0.056757218 0.057224462 0.059169475 0.060566366 0.061028450 0.061726431 0.062389739 0.063338016 0.064526655 0.065328303 0.065991924 0.066599617 0.068371818 0.069086421 0.070283266 0.072750763 0.074401548 0.074790692 0.076523236 0.078595052 0.084220123 0.086784253 0.087140527 0.087627264 0.089314570 0.090578685 0.091474958 0.094048920 0.094932814 0.095799437 0.096439512 0.097852488 0.098833263 0.099426095 0.100200709 0.100934421 0.102483895 0.103213810 0.103618843 0.104379110 0.104579529 0.106349813 0.106989659 0.108169352 0.109819531 0.111058761 0.112424374 0.113514673 0.115034747 0.116245414 0.116826510 0.118717467 0.120857429 0.122366546 0.123184144 0.124622738 0.126191549 0.126308094 0.126660337 0.127277241 0.132054205 0.135083376 0.135832627 0.142827819 0.143849158 0.147080033 0.147565831 0.149754941 0.152287066 0.154676353 0.155215305 0.156639962 0.161530798 0.161912178 0.173767358 0.174264535 0.181525333 0.184872091 0.186428301 0.189635737 0.190407285 0.194171657 0.195392743 0.198700688 0.200300929 0.205273715 0.207040902 0.207382026 0.210245427 0.216435350 0.216853798 0.217970927 0.219225321 0.220840202 0.225294552 0.226710692 0.232340801 0.235130212 0.235708025 0.235997271 0.244687277 0.256084115 0.257279033 0.263939341 0.269955070 0.280736411 0.283340717 0.286337779 0.291911071 0.296980489 0.304415460 0.305821879 0.307322154 0.314453590 0.316774506 0.317407464 0.322234715 0.330109779 0.332852513 0.351833434 0.352748807 0.355098369 0.355863689 0.360079583 0.363043464 0.364307998 0.384183465 0.386053584 0.392201533 0.410607627 0.425989312 0.431136800 0.462456388 0.469141838 0.478699132 0.484307284 0.484500281 0.487589554 0.491480110 0.509651743 0.515609737 0.535442360 0.569287839 0.575191918 0.591755112 0.594081209 0.607350710 0.608414384 0.644768146 0.647596627 0.649743067 0.674355616 0.678433266 0.686219179 0.692021806 0.693653619 0.700038561 0.704721093 0.718293373 0.742270505 0.751426591 0.759441474 0.770320688 0.773292275 0.779607296 0.811005786 0.815963365 0.819922080 0.822931919 0.823627802 0.831758501 0.834992252 0.837847903 0.842562826 0.845915518 0.847569874 0.849994373 0.859325509 0.865946614 0.867379520 0.874378459 0.886066470 0.886334364 0.889721953 0.900064348 0.901094046 0.904128847 0.923854603 0.928035520 0.936530899 0.937819973 0.966225827 0.976410015 0.986801252 1.001714110 1.020263205 1.028543418 1.042076145 1.051043891 1.057679918 1.068857881 1.086926430 1.088799677 1.104763415 1.108101970 1.112573260 1.126290568 1.135985136 1.140493079 1.144689646 1.176448500 1.179102020 1.181804860 1.187038991 1.191600040 1.197849662 1.224728284 1.228402183 1.274437382 1.302786189 1.321377127 1.328410724 1.333205997 1.336489318 1.338146425 1.342445993 1.343335424 1.345036492 1.359309717 1.379349099 1.383226746 1.385732470 1.410996808 1.420521894 1.432106141 1.551495308 1.685096875 1.776156820</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">275</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33792918" y3="0.04984028" z3="-0.18989262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3832262" y3="0.16643466" z3="0.42242322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64526621" y3="0.44027265" z3="-0.3378369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72998087" y3="1.2336334" z3="-2.26170688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38781448" y3="0.43340877" z3="-1.18371731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72971983" y3="0.84544606" z3="-3.66219362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63671853" y3="1.74666745" z3="-3.13592029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3879519" y3="2.59206854" z3="-4.62077466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56329861" y3="1.25126187" z3="-4.3761261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51029733" y3="2.92859488" z3="-5.1814323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92301056" y3="-0.48516234" z3="-3.44106287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09714535" y3="0.04509411" z3="-1.00184275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40035548" y3="-1.09902407" z3="-2.00068656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92885614" y3="-0.97029686" z3="-1.82546313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10435563" y3="-2.42279057" z3="-1.84804248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13846707" y3="-3.61421892" z3="0.66852494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01208051" y3="-5.25171364" z3="-4.74754463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24069774" y3="-4.99473287" z3="-3.70972309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83811524" y3="-4.30619116" z3="-1.09001006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78402218" y3="-4.58769938" z3="-2.85746583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55658371" y3="-5.08396971" z3="-3.25210103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85623314" y3="-4.73404473" z3="-1.93785125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49744339" y3="-4.25843595" z3="-1.53111567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81759677" y3="-4.50934517" z3="-3.20432432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35506444" y3="-5.39721841" z3="-3.92765846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89337221" y3="-4.77011918" z3="-1.59469021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02716114" y3="-3.85887152" z3="0.23117556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16714388" y3="-3.6513216" z3="0.87847588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05361543" y3="-4.11719096" z3="0.44554108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1602125" y3="-3.51914731" z3="2.34578327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21449382" y3="-3.34370544" z3="5.14436007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35364137" y3="-3.73461689" z3="3.05047398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99383088" y3="-3.22103468" z3="3.06633629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01823474" y3="-3.13429143" z3="4.45539387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38007113" y3="-3.64884307" z3="4.43966924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26754473" y3="-3.98003212" z3="2.50296865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03709243" y3="-3.07656076" z3="2.56026157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08999581" y3="-2.92239139" z3="4.99350152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31615993" y3="-3.82807733" z3="4.97583383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23293405" y3="-3.2838492" z3="6.23616844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41761091" y3="-3.89529883" z3="-0.62675678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17755597" y3="-3.39178495" z3="-1.07934382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52006928" y3="0.24792457" z3="-4.711317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08516199" y3="-1.7274669" z3="0.02638258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90678891" y3="-0.97833123" z3="1.18859086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84466512" y3="-0.32630934" z3="1.51809539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38018942" y3="0.56274295" z3="1.21762371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46344882" y3="1.45169205" z3="-0.414194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98256798" y3="-0.6803311" z3="1.40458569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38293004" y3="1.7652503" z3="2.65433885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87752355" y3="-0.9732766" z3="2.09087348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64487464" y3="-0.36309024" z3="3.3503414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21611517" y3="0.75909634" z3="-1.23696639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30216759" y3="2.249816" z3="-0.41241315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44789317" y3="1.92446135" z3="-0.57977051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01176456" y3="-1.04131762" z3="2.44597661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9523256" y3="-0.21203651" z3="1.16598892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86398658" y3="-1.52536946" z3="0.70687628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43594075" y3="1.23274344" z3="3.62042815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54690736" y3="2.36278182" z3="2.65017384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23235648" y3="2.46906315" z3="2.59733359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77956362" y3="-0.8193867" z3="3.85736035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55679125" y3="-0.54140844" z3="3.9352544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47736918" y3="0.7202346" z3="3.23314517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83682931" y3="-0.70573765" z3="0.99298292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40747281" y3="-2.03166564" z3="0.8541733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75527081" y3="-2.67678882" z3="1.89750099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54961114" y3="-1.98312509" z3="3.0865051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03136679" y3="-0.69209195" z3="3.28186406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68300139" y3="-0.06044443" z3="2.22728258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51206456" y3="-2.53010567" z3="-0.11027913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35696752" y3="-3.6848052" z3="1.7740513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68966788" y3="-2.58218546" z3="4.11202184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85215713" y3="-0.18217207" z3="4.22922459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02859901" y3="0.97049951" z3="2.34288491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79605762" y3="0.47299648" z3="-4.28541106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77893434" y3="-0.49216374" z3="-4.45928131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43545159" y3="-1.68623774" z3="-5.08347016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15026234" y3="-1.9218825" z3="-5.56211457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82575513" y3="-0.95346417" z3="-5.3645764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0375725" y3="1.39837289" z3="-3.75576917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7968274" y3="-0.34255697" z3="-4.09770313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45064759" y3="-2.7327117" z3="-5.22053733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0764095" y3="-2.86394484" z3="-6.06113539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84687077" y3="-1.142764" z3="-5.70055659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3576997" y3="-1.8860989" z3="5.05156449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31671663" y3="-3.72516496" z3="3.94709245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23193423" y3="-3.63496265" z3="-6.00029707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45112744" y3="-2.64492399" z3="-4.5362397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07216678" y3="1.15979002" z3="-1.48705546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.113664" y3="1.54781351" z3="-2.46809341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44165954" y3="1.48738717" z3="-1.68275719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85460846" y3="2.14992716" z3="-2.81257678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16609908" y3="1.19060878" z3="-0.91797388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91176937" y3="2.39170893" z3="-2.95490802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5770093" y3="2.21428456" z3="-3.6366025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9094106" y3="2.50676587" z3="-3.80404842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85775297" y3="2.48595252" z3="-4.41268555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24320456" y3="3.01313722" z3="-4.71420048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40981303" y3="3.15075281" z3="-3.33672246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29693829" y3="3.56420846" z3="-4.12691624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21952009" y3="4.16110088" z3="-2.74469511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97351255" y3="5.49411945" z3="-2.97311368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04608127" y3="3.87170093" z3="-2.09385007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61216059" y3="6.24901947" z3="-2.50586724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07715116" y3="4.95003649" z3="-4.35759517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89977878" y3="5.89831766" z3="-3.80147193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22787653" y3="5.24822551" z3="-4.98013439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71948945" y3="6.96162392" z3="-3.98286194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48294398" y3="-2.20887426" z3="-0.28789441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45353662" y3="-2.99873867" z3="-1.05706239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00633383" y3="-2.59558977" z3="0.60090955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10221951" y3="-1.3900475" z3="-0.70084142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18639555" y3="-1.42658796" z3="-1.1466357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32683211" y3="-0.38615995" z3="-1.49161032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10842947" y3="-1.55091949" z3="-0.94623879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42954348" y3="-2.07899262" z3="-1.99862931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3379,.0498,-.1899;7.3832,.1664,.4224;6.6453,.4403,-.3378;4.73,1.2336,-2.2617;4.3878,.4334,-1.1837;2.7297,.8454,-3.6622;3.6367,1.7467,-3.1359;1.388,2.5921,-4.6208;1.5633,1.2513,-4.3761;.5103,2.9286,-5.1814;2.923,-.4852,-3.4411;3.0971,.0451,-1.0018;2.4004,-1.099,-2.0007;.9289,-.9703,-1.8255;3.1044,-2.4228,-1.848;-.1385,-3.6142,.6685;-.0121,-5.2517,-4.7475;-.2407,-4.9947,-3.7097;-.8381,-4.3062,-1.09;.784,-4.5877,-2.8575;-1.5566,-5.084,-3.2521;-1.8562,-4.734,-1.9379;.4974,-4.2584,-1.5311;1.8176,-4.5093,-3.2043;-2.3551,-5.3972,-3.9277;-2.8934,-4.7701,-1.5947;-1.0272,-3.8589,.2312;-2.1671,-3.6513,.8785;-3.0536,-4.1172,.4455;-2.1602,-3.5191,2.3458;-2.2145,-3.3437,5.1444;-3.3536,-3.7346,3.0505;-.9938,-3.221,3.0663;-1.0182,-3.1343,4.4554;-3.3801,-3.6488,4.4397;-4.2675,-3.98,2.503;-.0371,-3.0766,2.5603;-.09,-2.9224,4.9935;-4.3162,-3.8281,4.9758;-2.2329,-3.2838,6.2362;1.4176,-3.8953,-.6268;2.1776,-3.3918,-1.0793;.5201,.2479,-4.7113;-3.0852,-1.7275,.0264;-2.9068,-.9783,1.1886;-1.8447,-.3263,1.5181;-.3802,.5627,1.2176;-.4634,1.4517,-.4142;.9826,-.6803,1.4046;-.3829,1.7653,2.6543;-3.8775,-.9733,2.0909;-3.6449,-.3631,3.3503;-.2161,.7591,-1.237;.3022,2.2498,-.4124;-1.4479,1.9245,-.5798;1.0118,-1.0413,2.446;1.9523,-.212,1.166;.864,-1.5254,.7069;-.4359,1.2327,3.6204;.5469,2.3628,2.6502;-1.2324,2.4691,2.5973;-2.7796,-.8194,3.8574;-4.5568,-.5414,3.9353;-3.4774,.7202,3.2331;4.8368,-.7057,.993;4.4075,-2.0317,.8542;3.7553,-2.6768,1.8975;3.5496,-1.9831,3.0865;4.0314,-.6921,3.2819;4.683,-.0604,2.2273;4.5121,-2.5301,-.1103;3.357,-3.6848,1.7741;2.6897,-2.5822,4.112;3.8522,-.1822,4.2292;5.0286,.9705,2.3429;-.7961,.473,-4.2854;-1.7789,-.4922,-4.4593;-1.4355,-1.6862,-5.0835;-.1503,-1.9219,-5.5621;.8258,-.9535,-5.3646;-1.0376,1.3984,-3.7558;-2.7968,-.3426,-4.0977;-2.4506,-2.7327,-5.2205;.0764,-2.8639,-6.0611;1.8469,-1.1428,-5.7006;2.3577,-1.8861,5.0516;2.3167,-3.7252,3.9471;-2.2319,-3.635,-6.0003;-3.4511,-2.6449,-4.5362;7.0722,1.1598,-1.4871;6.1137,1.5478,-2.4681;8.4417,1.4874,-1.6828;8.8546,2.1499,-2.8126;9.1661,1.1906,-.918;9.9118,2.3917,-2.9549;6.577,2.2143,-3.6366;7.9094,2.5068,-3.804;5.8578,2.486,-4.4127;8.2432,3.0131,-4.7142;3.4098,3.1508,-3.3367;2.2969,3.5642,-4.1269;4.2195,4.1611,-2.7447;3.9735,5.4941,-2.9731;5.0461,3.8717,-2.0939;4.6122,6.249,-2.5059;2.0772,4.95,-4.3576;2.8998,5.8983,-3.8015;1.2279,5.2482,-4.9801;2.7195,6.9616,-3.9829;-4.4829,-2.2089,-.2879;-4.4535,-2.9987,-1.0571;-5.0063,-2.5956,.6009;-5.1022,-1.39,-.7008;-2.1864,-1.4266,-1.1466;-2.3268,-.3862,-1.4916;-1.1084,-1.5509,-.9462;-2.4295,-2.079,-1.9986;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420718397</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001107368710 0.000211290727 0.022499986197 0.005342715369</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030697429 -0.000192074 0.000051757 0.000159559 0.000220268 0.000361200 0.000426940 0.000587561 0.000768364 0.000862243 0.001009775 0.001059760 0.001232497 0.001363470 0.001414944 0.001454673 0.001561703 0.001692271 0.001804326 0.001892531 0.002170175 0.002341973 0.002435409 0.002577651 0.002676088 0.003003556 0.003088763 0.003396463 0.003517397 0.003924209 0.004456007 0.004683414 0.004749263 0.005089390 0.006064844 0.006096400 0.006301289 0.006650316 0.006952647 0.007715302 0.008107084 0.008181302 0.008377082 0.009355033 0.009934442 0.010151007 0.010686604 0.011111630 0.011936676 0.012145357 0.012931973 0.013101775 0.014170223 0.014599368 0.015340329 0.015529384 0.015936903 0.016537402 0.016826542 0.017517907 0.018138667 0.018638863 0.019445246 0.019579804 0.020112438 0.020722766 0.021250504 0.021411631 0.022447585 0.023137943 0.024203338 0.026405671 0.026822972 0.027726505 0.027833329 0.029551417 0.030332768 0.031613357 0.033295257 0.033658849 0.034117210 0.035802088 0.037084794 0.037504759 0.039550715 0.040061498 0.040748865 0.041053465 0.042545207 0.044679660 0.045490902 0.047119170 0.047992879 0.049268048 0.050491655 0.051045904 0.051237438 0.051608569 0.052487837 0.052696671 0.052929441 0.053114381 0.054742062 0.054961853 0.056042986 0.056275665 0.056565036 0.056774518 0.057224693 0.059170087 0.060567206 0.061032469 0.061727115 0.062393981 0.063347945 0.064527741 0.065328506 0.065992306 0.066601037 0.068372026 0.069095720 0.070283422 0.072751542 0.074403429 0.074790650 0.076524028 0.078611680 0.084227936 0.086794918 0.087140525 0.087627417 0.089322142 0.090586714 0.091477526 0.094049220 0.094944872 0.095799648 0.096441176 0.097852755 0.098835808 0.099455014 0.100202461 0.100935197 0.102485107 0.103214936 0.103619561 0.104387037 0.104579985 0.106350071 0.106992843 0.108169479 0.109827310 0.111058749 0.112426076 0.113516387 0.115035365 0.116250458 0.116827527 0.118717629 0.120882669 0.122375359 0.123186144 0.124643490 0.126192491 0.126310039 0.126661146 0.127281191 0.132057103 0.135083312 0.135832474 0.142831275 0.143849254 0.147080039 0.147565992 0.149755662 0.152290971 0.154683073 0.155221114 0.156641635 0.161532928 0.161919307 0.173767899 0.174264653 0.181539139 0.184872694 0.186434310 0.189636934 0.190409870 0.194171346 0.195392975 0.198702819 0.200303447 0.205273143 0.207048670 0.207381775 0.210247289 0.216444484 0.216884736 0.217971792 0.219245355 0.220843009 0.225296889 0.226711923 0.232348382 0.235134479 0.235708080 0.235998985 0.244687738 0.256086257 0.257281888 0.263945109 0.269957951 0.280736416 0.283341643 0.286339891 0.291911082 0.296980974 0.304418789 0.305834141 0.307323898 0.314462465 0.316774915 0.317409241 0.322234721 0.330111297 0.332856852 0.351834858 0.352761577 0.355099233 0.355864823 0.360080057 0.363044521 0.364310432 0.384184785 0.386055810 0.392202719 0.410608349 0.425989813 0.431155285 0.462457875 0.469141984 0.478721215 0.484325076 0.484508936 0.487594927 0.491481452 0.509657445 0.515611064 0.535442560 0.569296097 0.575196614 0.591757879 0.594081577 0.607353389 0.608417424 0.644801072 0.647598115 0.649746590 0.674358251 0.678435435 0.686246646 0.692032855 0.693658970 0.700040152 0.704737780 0.718296068 0.742270502 0.751426666 0.759441986 0.770428690 0.773332380 0.779613409 0.811007665 0.816025757 0.819924586 0.822949787 0.823629284 0.831759238 0.834995373 0.837849451 0.842566472 0.845923611 0.847582558 0.850000495 0.859333944 0.865946675 0.867435058 0.874411835 0.886093972 0.886355332 0.889722628 0.900088429 0.901095214 0.904131493 0.923858958 0.928036288 0.936530966 0.937823438 0.966229033 0.976410194 0.986805011 1.001715481 1.020263249 1.028573634 1.042079059 1.051051242 1.057682149 1.068858235 1.086933320 1.088812339 1.104776783 1.108102001 1.112582275 1.126382104 1.135985432 1.140494845 1.144693427 1.176453797 1.179105598 1.181805161 1.187039307 1.191600747 1.197889176 1.224729621 1.228421322 1.274443906 1.302790341 1.321379481 1.328410648 1.333208905 1.336495528 1.338148444 1.342455955 1.343342324 1.345038610 1.359319318 1.379350506 1.383238076 1.385735299 1.411008739 1.420527386 1.432108304 1.551496032 1.685140551 1.776161656</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">276</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33661779" y3="0.05642101" z3="-0.18734783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38178428" y3="0.1731592" z3="0.42478046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64380961" y3="0.44575439" z3="-0.33596221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72871373" y3="1.23636887" z3="-2.26107301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38637365" y3="0.43838264" z3="-1.18175014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72981891" y3="0.8450942" z3="-3.66223008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6361702" y3="1.7474665" z3="-3.13715775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38830127" y3="2.58965399" z3="-4.62502716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56388895" y3="1.24912048" z3="-4.37770352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51093952" y3="2.92504452" z3="-5.18677066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92313716" y3="-0.48479521" z3="-3.43827991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09570022" y3="0.05014983" z3="-0.99974073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39980265" y3="-1.09595069" z3="-1.99719897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92806418" y3="-0.96750262" z3="-1.82393659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10399864" y3="-2.41920036" z3="-1.84122285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14072802" y3="-3.61192576" z3="0.66929589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00711414" y3="-5.24825755" z3="-4.7472417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23686998" y3="-4.9912481" z3="-3.70962938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83818283" y3="-4.30255686" z3="-1.09049833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78715478" y3="-4.58579643" z3="-2.85544811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55404941" y3="-5.07848732" z3="-3.25409044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85553621" y3="-4.7287475" z3="-1.94028708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49835229" y3="-4.25621259" z3="-1.52960862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82032683" y3="-4.50590585" z3="-3.20005223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35304391" y3="-5.38951524" z3="-3.93114264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89236691" y3="-4.76616065" z3="-1.59913298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02873792" y3="-3.856573" z3="0.23084578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16924381" y3="-3.6507478" z3="0.87737038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05524679" y3="-4.1153339" z3="0.44238629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16379476" y3="-3.52121396" z3="2.34487877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22086336" y3="-3.3489113" z3="5.14355214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35861158" y3="-3.73387847" z3="3.04809937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99724138" y3="-3.2284845" z3="3.0671024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02316411" y3="-3.14280863" z3="4.45607597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38613055" y3="-3.6500364" z3="4.43738906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27348762" y3="-3.97445827" z3="2.49929254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03806685" y3="-3.08957454" z3="2.56241898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09432899" y3="-2.93514336" z3="4.99510517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32311298" y3="-3.82727635" z3="4.97235412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24049647" y3="-3.29018819" z3="6.23536424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4177494" y3="-3.89431717" z3="-0.62364548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17623191" y3="-3.38848077" z3="-1.07415799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52101825" y3="0.24520473" z3="-4.71120952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0867326" y3="-1.72431209" z3="0.02757899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.908093" y3="-0.97643246" z3="1.19052768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84753218" y3="-0.32273575" z3="1.52028183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37554715" y3="0.55564086" z3="1.22069382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.455609" y3="1.45332904" z3="-0.40659866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97986703" y3="-0.69635155" z3="1.40101605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.366598" y3="1.75054955" z3="2.6632418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87832779" y3="-0.97290065" z3="2.09368376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64443152" y3="-0.36369977" z3="3.35375569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21730102" y3="0.76252842" z3="-1.23340154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31892552" y3="2.24318949" z3="-0.40319936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43559363" y3="1.93673073" z3="-0.56685501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00754492" y3="-1.06181769" z3="2.44116171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9525314" y3="-0.23143423" z3="1.16475179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85816658" y3="-1.53781814" z3="0.70004664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42200931" y3="1.21322994" z3="3.62654052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56817628" y3="2.34028183" z3="2.66069208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2103453" y3="2.46151971" z3="2.61124439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.777754" y3="-0.8189033" z3="3.85909548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5552288" y3="-0.54344532" z3="3.94075074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47829215" y3="0.71961081" z3="3.23717262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83604911" y3="-0.69915768" z3="0.99584561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41309012" y3="-2.02728771" z3="0.85783394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76108208" y3="-2.67393171" z3="1.90045054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54843857" y3="-1.97931728" z3="3.08738377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02360022" y3="-0.68575845" z3="3.2819868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67600262" y3="-0.05266161" z3="2.22874793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51943977" y3="-2.52567643" z3="-0.10793563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36758589" y3="-3.68378062" z3="1.77762119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68760391" y3="-2.58031746" z3="4.11108896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83831896" y3="-0.17499978" z3="4.22730554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01690841" y3="0.98005202" z3="2.34392042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79484616" y3="0.4714351" z3="-4.2862139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77825123" y3="-0.49345341" z3="-4.4618451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43514045" y3="-1.68780793" z3="-5.08361578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14979201" y3="-1.92460705" z3="-5.56106398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82658684" y3="-0.95695407" z3="-5.36470443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03586312" y3="1.3973037" z3="-3.75785684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79620882" y3="-0.34266143" z3="-4.10183566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45121772" y3="-2.73315266" z3="-5.22273535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07687314" y3="-2.86713573" z3="-6.05999875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84728267" y3="-1.14771913" z3="-5.69948255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3526713" y3="-1.88517149" z3="5.05070431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31790424" y3="-3.72404052" z3="3.94560105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23324746" y3="-3.634829" z3="-6.0034776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45128485" y3="-2.64454614" z3="-4.53861213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07082451" y3="1.1636957" z3="-1.48608291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11243209" y3="1.55027328" z3="-2.46771239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4403749" y3="1.4910214" z3="-1.68231386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85333237" y3="2.15170565" z3="-2.81326338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16470894" y3="1.19513976" z3="-0.91715044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91035434" y3="2.39238888" z3="-2.95623915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57577344" y3="2.21472544" z3="-3.63741828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90806602" y3="2.50640193" z3="-3.80548165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85625152" y3="2.48432882" z3="-4.41406016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24182356" y3="3.01073345" z3="-4.7166647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40950145" y3="3.1509277" z3="-3.34159645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29708262" y3="3.5626906" z3="-4.13334955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21881914" y3="4.16277773" z3="-2.75163193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97322889" y3="5.49517552" z3="-2.98403231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04467991" y3="3.87521614" z3="-2.09910662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6114333" y3="6.25151168" z3="-2.51809017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07722218" y3="4.94835804" z3="-4.36738698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90015769" y3="5.89744273" z3="-3.81420082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22818365" y3="5.24528595" z3="-4.99091018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72045826" y3="6.96021638" z3="-3.99890227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48544351" y3="-2.20451964" z3="-0.2862322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45826811" y3="-2.99536532" z3="-1.05558426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00917573" y3="-2.58974819" z3="0.60372238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10385599" y3="-1.38491305" z3="-0.6989791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18813465" y3="-1.42269417" z3="-1.14528074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32643247" y3="-0.37984527" z3="-1.48755891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11149993" y3="-1.54774679" z3="-0.94398375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43217298" y3="-2.07323189" z3="-1.99860746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3366,.0564,-.1873;7.3818,.1732,.4248;6.6438,.4458,-.336;4.7287,1.2364,-2.2611;4.3864,.4384,-1.1818;2.7298,.8451,-3.6622;3.6362,1.7475,-3.1372;1.3883,2.5897,-4.625;1.5639,1.2491,-4.3777;.5109,2.925,-5.1868;2.9231,-.4848,-3.4383;3.0957,.0501,-.9997;2.3998,-1.096,-1.9972;.9281,-.9675,-1.8239;3.104,-2.4192,-1.8412;-.1407,-3.6119,.6693;-.0071,-5.2483,-4.7472;-.2369,-4.9912,-3.7096;-.8382,-4.3026,-1.0905;.7872,-4.5858,-2.8554;-1.554,-5.0785,-3.2541;-1.8555,-4.7287,-1.9403;.4984,-4.2562,-1.5296;1.8203,-4.5059,-3.2001;-2.353,-5.3895,-3.9311;-2.8924,-4.7662,-1.5991;-1.0287,-3.8566,.2308;-2.1692,-3.6507,.8774;-3.0552,-4.1153,.4424;-2.1638,-3.5212,2.3449;-2.2209,-3.3489,5.1436;-3.3586,-3.7339,3.0481;-.9972,-3.2285,3.0671;-1.0232,-3.1428,4.4561;-3.3861,-3.65,4.4374;-4.2735,-3.9745,2.4993;-.0381,-3.0896,2.5624;-.0943,-2.9351,4.9951;-4.3231,-3.8273,4.9724;-2.2405,-3.2902,6.2354;1.4177,-3.8943,-.6236;2.1762,-3.3885,-1.0742;.521,.2452,-4.7112;-3.0867,-1.7243,.0276;-2.9081,-.9764,1.1905;-1.8475,-.3227,1.5203;-.3755,.5556,1.2207;-.4556,1.4533,-.4066;.9799,-.6964,1.401;-.3666,1.7505,2.6632;-3.8783,-.9729,2.0937;-3.6444,-.3637,3.3538;-.2173,.7625,-1.2334;.3189,2.2432,-.4032;-1.4356,1.9367,-.5669;1.0075,-1.0618,2.4412;1.9525,-.2314,1.1648;.8582,-1.5378,.7;-.422,1.2132,3.6265;.5682,2.3403,2.6607;-1.2103,2.4615,2.6112;-2.7778,-.8189,3.8591;-4.5552,-.5434,3.9408;-3.4783,.7196,3.2372;4.836,-.6992,.9958;4.4131,-2.0273,.8578;3.7611,-2.6739,1.9005;3.5484,-1.9793,3.0874;4.0236,-.6858,3.282;4.676,-.0527,2.2287;4.5194,-2.5257,-.1079;3.3676,-3.6838,1.7776;2.6876,-2.5803,4.1111;3.8383,-.175,4.2273;5.0169,.9801,2.3439;-.7948,.4714,-4.2862;-1.7783,-.4935,-4.4618;-1.4351,-1.6878,-5.0836;-.1498,-1.9246,-5.5611;.8266,-.957,-5.3647;-1.0359,1.3973,-3.7579;-2.7962,-.3427,-4.1018;-2.4512,-2.7332,-5.2227;.0769,-2.8671,-6.06;1.8473,-1.1477,-5.6995;2.3527,-1.8852,5.0507;2.3179,-3.724,3.9456;-2.2332,-3.6348,-6.0035;-3.4513,-2.6445,-4.5386;7.0708,1.1637,-1.4861;6.1124,1.5503,-2.4677;8.4404,1.491,-1.6823;8.8533,2.1517,-2.8133;9.1647,1.1951,-.9172;9.9104,2.3924,-2.9562;6.5758,2.2147,-3.6374;7.9081,2.5064,-3.8055;5.8563,2.4843,-4.4141;8.2418,3.0107,-4.7167;3.4095,3.1509,-3.3416;2.2971,3.5627,-4.1333;4.2188,4.1628,-2.7516;3.9732,5.4952,-2.984;5.0447,3.8752,-2.0991;4.6114,6.2515,-2.5181;2.0772,4.9484,-4.3674;2.9002,5.8974,-3.8142;1.2282,5.2453,-4.9909;2.7205,6.9602,-3.9989;-4.4854,-2.2045,-.2862;-4.4583,-2.9954,-1.0556;-5.0092,-2.5897,.6037;-5.1039,-1.3849,-.699;-2.1881,-1.4227,-1.1453;-2.3264,-.3798,-1.4876;-1.1115,-1.5477,-.944;-2.4322,-2.0732,-1.9986;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422208277</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001115741204 0.000208899165 0.021468250075 0.005346080174</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030698661 -0.000532032 0.000098017 0.000185296 0.000213760 0.000354340 0.000427188 0.000587465 0.000721621 0.000852084 0.001009314 0.001070174 0.001232435 0.001367701 0.001420126 0.001460724 0.001558963 0.001697227 0.001805298 0.001889673 0.002160422 0.002346342 0.002434323 0.002581047 0.002674464 0.003005531 0.003093210 0.003393579 0.003518402 0.003917691 0.004455673 0.004686589 0.004749674 0.005086103 0.006060494 0.006097262 0.006300335 0.006651704 0.006966136 0.007708535 0.008099926 0.008173421 0.008363799 0.009358375 0.009932289 0.010149899 0.010668530 0.011115434 0.011945545 0.012141675 0.012933311 0.013112299 0.014169764 0.014600256 0.015338576 0.015531175 0.015936973 0.016558240 0.016823862 0.017522631 0.018145052 0.018645823 0.019432424 0.019583484 0.020118582 0.020721208 0.021250970 0.021417716 0.022431566 0.023136240 0.024159715 0.026403886 0.026828249 0.027748989 0.027834045 0.029554100 0.030334669 0.031610145 0.033294836 0.033659609 0.034123808 0.035799436 0.037095177 0.037496735 0.039543410 0.040049159 0.040670179 0.041023621 0.042554205 0.044682457 0.045504353 0.047118365 0.047999762 0.049268769 0.050491388 0.051047946 0.051239079 0.051614634 0.052488244 0.052696783 0.052930351 0.053116510 0.054742017 0.054965845 0.056043001 0.056275938 0.056565198 0.056797789 0.057224800 0.059170297 0.060568791 0.061036267 0.061729083 0.062398488 0.063363320 0.064529062 0.065326304 0.065991664 0.066603364 0.068369273 0.069105314 0.070283063 0.072751910 0.074405937 0.074790293 0.076519776 0.078628708 0.084245798 0.086804727 0.087141395 0.087628195 0.089332219 0.090596323 0.091477741 0.094049600 0.094959942 0.095797334 0.096441898 0.097852836 0.098832361 0.099493450 0.100205673 0.100935287 0.102485855 0.103216543 0.103619859 0.104397707 0.104579572 0.106348852 0.106996042 0.108169683 0.109836642 0.111057130 0.112427344 0.113527840 0.115035169 0.116254759 0.116828598 0.118718017 0.120916275 0.122384978 0.123189756 0.124671036 0.126193627 0.126313997 0.126663788 0.127283868 0.132064424 0.135083042 0.135832693 0.142835571 0.143848370 0.147079904 0.147566218 0.149756685 0.152258553 0.154688521 0.155202538 0.156644889 0.161533935 0.161927400 0.173769139 0.174264718 0.181562035 0.184872318 0.186442147 0.189639026 0.190411947 0.194171758 0.195394496 0.198705702 0.200306946 0.205267462 0.207054930 0.207381072 0.210249118 0.216451094 0.216912088 0.217972799 0.219270103 0.220845332 0.225298266 0.226712412 0.232356816 0.235140733 0.235708517 0.236000987 0.244688422 0.256088537 0.257283950 0.263949115 0.269959710 0.280736060 0.283342598 0.286342261 0.291910661 0.296982634 0.304420410 0.305845755 0.307324630 0.314470374 0.316774533 0.317409967 0.322235125 0.330112987 0.332862361 0.351833390 0.352774867 0.355100447 0.355866127 0.360079127 0.363043676 0.364311818 0.384177973 0.386056611 0.392202951 0.410603517 0.425991120 0.431168551 0.462458784 0.469141240 0.478741654 0.484338275 0.484518996 0.487588942 0.491482652 0.509661648 0.515611130 0.535438171 0.569290827 0.575195908 0.591747073 0.594081534 0.607354606 0.608414374 0.644819060 0.647598462 0.649744223 0.674361902 0.678433651 0.686271514 0.692042885 0.693659919 0.700039640 0.704749726 0.718296652 0.742269723 0.751426573 0.759442138 0.770518663 0.773362569 0.779618194 0.811006609 0.816076010 0.819928002 0.822960463 0.823629365 0.831759345 0.834995713 0.837850113 0.842568394 0.845930469 0.847594041 0.850004917 0.859344464 0.865946708 0.867494274 0.874437605 0.886111604 0.886375422 0.889722976 0.900110087 0.901095296 0.904136075 0.923861093 0.928038732 0.936531811 0.937831271 0.966231309 0.976410012 0.986810727 1.001716308 1.020263664 1.028594400 1.042083481 1.051063594 1.057685290 1.068858367 1.086939368 1.088817821 1.104786837 1.108101396 1.112589104 1.126451698 1.135985646 1.140497142 1.144696083 1.176458507 1.179106772 1.181806182 1.187039654 1.191600608 1.197919723 1.224730270 1.228430921 1.274439034 1.302794758 1.321379704 1.328409346 1.333205145 1.336492109 1.338134006 1.342416588 1.343344921 1.345039321 1.359329493 1.379352608 1.383244380 1.385744652 1.410856736 1.420530023 1.432034376 1.551496652 1.685168426 1.776155037</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">277</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33528158" y3="0.06016304" z3="-0.18933363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38094731" y3="0.17202158" z3="0.4220952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64348664" y3="0.44702349" z3="-0.33813135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72983614" y3="1.24149532" z3="-2.26308097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38590542" y3="0.44421072" z3="-1.1834775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73197163" y3="0.84945687" z3="-3.66513543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63806193" y3="1.75238709" z3="-3.14028672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39160676" y3="2.59306737" z3="-4.63117456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56661172" y3="1.25304119" z3="-4.3818828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5146233" y3="2.92766545" z3="-5.19406182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92512583" y3="-0.48048975" z3="-3.43953397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09459228" y3="0.05756515" z3="-1.00154875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39890279" y3="-1.08940071" z3="-1.99828862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92708408" y3="-0.95925397" z3="-1.82741616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10202662" y3="-2.41289713" z3="-1.8393829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14293996" y3="-3.61731333" z3="0.6764804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00896272" y3="-5.23850676" z3="-4.74484497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23889661" y3="-4.98463875" z3="-3.70651006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83969684" y3="-4.30458727" z3="-1.08538538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78396577" y3="-4.57554071" z3="-2.85316325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55457908" y3="-5.07991145" z3="-3.24949691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85588026" y3="-4.73442481" z3="-1.93440729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49573115" y3="-4.25033419" z3="-1.52612915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81753816" y3="-4.49272687" z3="-3.19964451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3514863" y3="-5.39468177" z3="-3.92604217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89318831" y3="-4.77521713" z3="-1.59133826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03082903" y3="-3.86137038" z3="0.23694306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1718197" y3="-3.65335603" z3="0.88234568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05832478" y3="-4.11691878" z3="0.44687839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16740552" y3="-3.52351158" z3="2.34982719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22612798" y3="-3.35023081" z3="5.1484651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36343328" y3="-3.73314221" z3="3.05193559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00066834" y3="-3.23344521" z3="3.07309971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02734257" y3="-3.14724479" z3="4.46208582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39202852" y3="-3.64848918" z3="4.4411411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27755455" y3="-3.97296334" z3="2.50246183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04176166" y3="-3.09563541" z3="2.5695306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09872364" y3="-2.94072363" z3="5.00160968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33003196" y3="-3.82320519" z3="4.97527174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24655184" y3="-3.29085067" z3="6.24025294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41398744" y3="-3.88546027" z3="-0.62064989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17436154" y3="-3.3808607" z3="-1.07187409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52397202" y3="0.24867074" z3="-4.71526034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08607719" y3="-1.72719992" z3="0.03043995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91096116" y3="-0.97858076" z3="1.19348606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85133166" y3="-0.32418757" z3="1.52636187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37652365" y3="0.54794293" z3="1.22551912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45930562" y3="1.45308615" z3="-0.39754625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97511907" y3="-0.70959122" z3="1.39511187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35652329" y3="1.735695" z3="2.67419524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88404074" y3="-0.97478788" z3="2.09314455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65483988" y3="-0.36509058" z3="3.35350468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22449958" y3="0.76602288" z3="-1.2284807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31642341" y3="2.24137722" z3="-0.39284276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43877739" y3="1.9395412" z3="-0.55252055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00744049" y3="-1.07644609" z3="2.43412487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94657962" y3="-0.24570993" z3="1.1548175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84803896" y3="-1.54965885" z3="0.69283333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41346502" y3="1.1932869" z3="3.63465296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58248168" y3="2.31881358" z3="2.67272867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19549182" y3="2.45280911" z3="2.62832252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79066213" y3="-0.82174701" z3="3.86242517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56826604" y3="-0.54400852" z3="3.93566178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48696813" y3="0.71840012" z3="3.23738327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83319385" y3="-0.69509866" z3="0.99342905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41476309" y3="-2.02462677" z3="0.8564614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76334031" y3="-2.6719088" z3="1.89909259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54761287" y3="-1.97672137" z3="3.08566522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01769636" y3="-0.68124893" z3="3.27902424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66856215" y3="-0.04740076" z3="2.22520298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52677884" y3="-2.52461515" z3="-0.10631373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37330701" y3="-3.68310878" z3="1.77693332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68702865" y3="-2.5788881" z3="4.10899746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83016974" y3="-0.17019004" z3="4.22434883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00527751" y3="0.9865754" z3="2.33920857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79206928" y3="0.47367904" z3="-4.28912423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77457364" y3="-0.49190868" z3="-4.46198878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43082227" y3="-1.68621238" z3="-5.08581794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14549735" y3="-1.92207097" z3="-5.56396901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83024975" y3="-0.95333489" z3="-5.36680767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03366822" y3="1.3995181" z3="-3.76030784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79245716" y3="-0.34231204" z3="-4.1004266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44589444" y3="-2.73257656" z3="-5.22346481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08133591" y3="-2.86454695" z3="-6.06219255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85149767" y3="-1.14277425" z3="-5.70231807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3514554" y3="-1.88482426" z3="5.04860393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31645168" y3="-3.72243837" z3="3.94145779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22639074" y3="-3.63514674" z3="-6.00251976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44704858" y3="-2.64429223" z3="-4.5403152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07185798" y3="1.16412201" z3="-1.4883911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11412074" y3="1.55281931" z3="-2.469831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44218234" y3="1.48772868" z3="-1.68523017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85654935" y3="2.14701399" z3="-2.8164693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16616855" y3="1.19037586" z3="-0.92026144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91435504" y3="2.38541531" z3="-2.95980187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57888055" y3="2.21620214" z3="-3.63963492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91195643" y3="2.50461395" z3="-3.80818624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86016764" y3="2.4883082" z3="-4.41600086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24677419" y3="3.0085541" z3="-4.71938526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41197538" y3="3.15575242" z3="-3.34660498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30032834" y3="3.56669428" z3="-4.13982366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22171271" y3="4.16790783" z3="-2.75788717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97711585" y3="5.50011659" z3="-2.99242619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0473661" y3="3.88060325" z3="-2.10496981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.615867" y3="6.25658465" z3="-2.52777063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08179731" y3="4.9516779" z3="-4.37656075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90459185" y3="5.90165885" z3="-3.8236457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23340623" y3="5.24790261" z3="-5.00124777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72550268" y3="6.96427777" z3="-4.00997735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48320482" y3="-2.20830409" z3="-0.28747007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4520395" y3="-2.99871917" z3="-1.05605151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00933268" y3="-2.59412322" z3="0.60023546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10081306" y3="-1.38949225" z3="-0.70276607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18565242" y3="-1.42495184" z3="-1.14111364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32636891" y3="-0.38466875" z3="-1.48604038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10761401" y3="-1.54908023" z3="-0.94017912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42702321" y3="-2.07725249" z3="-1.99367266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3353,.0602,-.1893;7.3809,.172,.4221;6.6435,.447,-.3381;4.7298,1.2415,-2.2631;4.3859,.4442,-1.1835;2.732,.8495,-3.6651;3.6381,1.7524,-3.1403;1.3916,2.5931,-4.6312;1.5666,1.253,-4.3819;.5146,2.9277,-5.1941;2.9251,-.4805,-3.4395;3.0946,.0576,-1.0015;2.3989,-1.0894,-1.9983;.9271,-.9593,-1.8274;3.102,-2.4129,-1.8394;-.1429,-3.6173,.6765;-.009,-5.2385,-4.7448;-.2389,-4.9846,-3.7065;-.8397,-4.3046,-1.0854;.784,-4.5755,-2.8532;-1.5546,-5.0799,-3.2495;-1.8559,-4.7344,-1.9344;.4957,-4.2503,-1.5261;1.8175,-4.4927,-3.1996;-2.3515,-5.3947,-3.926;-2.8932,-4.7752,-1.5913;-1.0308,-3.8614,.2369;-2.1718,-3.6534,.8823;-3.0583,-4.1169,.4469;-2.1674,-3.5235,2.3498;-2.2261,-3.3502,5.1485;-3.3634,-3.7331,3.0519;-1.0007,-3.2334,3.0731;-1.0273,-3.1472,4.4621;-3.392,-3.6485,4.4411;-4.2776,-3.973,2.5025;-.0418,-3.0956,2.5695;-.0987,-2.9407,5.0016;-4.33,-3.8232,4.9753;-2.2466,-3.2909,6.2403;1.414,-3.8855,-.6206;2.1744,-3.3809,-1.0719;.524,.2487,-4.7153;-3.0861,-1.7272,.0304;-2.911,-.9786,1.1935;-1.8513,-.3242,1.5264;-.3765,.5479,1.2255;-.4593,1.4531,-.3975;.9751,-.7096,1.3951;-.3565,1.7357,2.6742;-3.884,-.9748,2.0931;-3.6548,-.3651,3.3535;-.2245,.766,-1.2285;.3164,2.2414,-.3928;-1.4388,1.9395,-.5525;1.0074,-1.0764,2.4341;1.9466,-.2457,1.1548;.848,-1.5497,.6928;-.4135,1.1933,3.6347;.5825,2.3188,2.6727;-1.1955,2.4528,2.6283;-2.7907,-.8217,3.8624;-4.5683,-.544,3.9357;-3.487,.7184,3.2374;4.8332,-.6951,.9934;4.4148,-2.0246,.8565;3.7633,-2.6719,1.8991;3.5476,-1.9767,3.0857;4.0177,-.6812,3.279;4.6686,-.0474,2.2252;4.5268,-2.5246,-.1063;3.3733,-3.6831,1.7769;2.687,-2.5789,4.109;3.8302,-.1702,4.2243;5.0053,.9866,2.3392;-.7921,.4737,-4.2891;-1.7746,-.4919,-4.462;-1.4308,-1.6862,-5.0858;-.1455,-1.9221,-5.564;.8302,-.9533,-5.3668;-1.0337,1.3995,-3.7603;-2.7925,-.3423,-4.1004;-2.4459,-2.7326,-5.2235;.0813,-2.8645,-6.0622;1.8515,-1.1428,-5.7023;2.3515,-1.8848,5.0486;2.3165,-3.7224,3.9415;-2.2264,-3.6351,-6.0025;-3.447,-2.6443,-4.5403;7.0719,1.1641,-1.4884;6.1141,1.5528,-2.4698;8.4422,1.4877,-1.6852;8.8565,2.147,-2.8165;9.1662,1.1904,-.9203;9.9144,2.3854,-2.9598;6.5789,2.2162,-3.6396;7.912,2.5046,-3.8082;5.8602,2.4883,-4.416;8.2468,3.0086,-4.7194;3.412,3.1558,-3.3466;2.3003,3.5667,-4.1398;4.2217,4.1679,-2.7579;3.9771,5.5001,-2.9924;5.0474,3.8806,-2.105;4.6159,6.2566,-2.5278;2.0818,4.9517,-4.3766;2.9046,5.9017,-3.8236;1.2334,5.2479,-5.0012;2.7255,6.9643,-4.01;-4.4832,-2.2083,-.2875;-4.452,-2.9987,-1.0561;-5.0093,-2.5941,.6002;-5.1008,-1.3895,-.7028;-2.1857,-1.425,-1.1411;-2.3264,-.3847,-1.486;-1.1076,-1.5491,-.9402;-2.427,-2.0773,-1.9937;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420659131</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001377824929 0.000264234333 0.023927929268 0.005338376208</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030701134 -0.000333420 0.000055981 0.000205947 0.000234788 0.000353054 0.000411188 0.000587489 0.000718117 0.000855661 0.001019069 0.001101895 0.001229261 0.001361229 0.001426277 0.001471120 0.001555643 0.001694722 0.001807813 0.001886958 0.002165795 0.002349148 0.002432662 0.002576270 0.002675275 0.003006961 0.003092538 0.003381782 0.003522970 0.003901968 0.004457676 0.004688384 0.004751646 0.005079216 0.006062865 0.006097413 0.006299883 0.006653285 0.006978433 0.007697985 0.008091065 0.008158055 0.008336438 0.009363309 0.009937582 0.010150509 0.010643384 0.011119790 0.011951666 0.012142483 0.012939104 0.013123608 0.014168491 0.014601207 0.015336915 0.015532662 0.015936415 0.016564240 0.016808028 0.017523472 0.018155268 0.018650360 0.019413814 0.019590539 0.020129387 0.020711592 0.021251531 0.021422751 0.022400589 0.023129985 0.024066083 0.026398709 0.026836113 0.027773850 0.027835915 0.029555353 0.030337275 0.031607883 0.033292815 0.033660214 0.034128361 0.035800538 0.037102132 0.037483829 0.039530103 0.040031919 0.040556956 0.040990912 0.042558256 0.044681041 0.045514123 0.047118016 0.048008161 0.049269827 0.050492435 0.051051640 0.051240876 0.051618976 0.052488702 0.052696920 0.052931601 0.053121538 0.054742204 0.054970023 0.056043577 0.056276388 0.056565593 0.056828076 0.057225190 0.059170887 0.060571036 0.061040780 0.061732050 0.062402241 0.063380957 0.064531136 0.065323035 0.065987799 0.066603576 0.068365630 0.069116081 0.070280343 0.072752333 0.074401305 0.074789608 0.076518356 0.078644752 0.084269702 0.086813990 0.087142044 0.087628256 0.089340751 0.090606601 0.091479349 0.094050263 0.094970370 0.095796977 0.096442532 0.097852875 0.098830797 0.099556789 0.100210010 0.100937033 0.102487830 0.103217886 0.103619859 0.104414470 0.104579365 0.106347122 0.107004744 0.108169300 0.109845938 0.111058271 0.112427291 0.113532288 0.115032440 0.116258823 0.116829629 0.118718062 0.120962638 0.122393867 0.123195723 0.124714370 0.126195449 0.126316860 0.126668491 0.127287814 0.132077891 0.135083397 0.135833767 0.142843312 0.143850528 0.147080411 0.147564328 0.149755042 0.152209952 0.154697589 0.155184144 0.156648895 0.161519952 0.161940259 0.173769896 0.174264490 0.181577982 0.184872164 0.186448423 0.189642210 0.190412922 0.194171224 0.195394558 0.198710832 0.200312165 0.205262329 0.207060214 0.207383244 0.210251191 0.216465558 0.216949156 0.217973686 0.219306637 0.220847124 0.225297979 0.226713038 0.232365296 0.235150330 0.235709458 0.236006995 0.244689078 0.256092332 0.257285610 0.263951288 0.269963673 0.280737374 0.283345283 0.286345462 0.291911552 0.296986756 0.304422452 0.305866376 0.307324307 0.314475294 0.316774608 0.317410142 0.322235926 0.330107734 0.332873270 0.351831780 0.352791172 0.355096102 0.355863959 0.360079294 0.363043480 0.364311924 0.384151529 0.386055576 0.392202166 0.410590782 0.425991770 0.431176032 0.462460068 0.469139992 0.478768677 0.484352531 0.484542796 0.487579595 0.491484375 0.509666039 0.515603325 0.535429067 0.569289785 0.575191593 0.591705235 0.594081762 0.607349786 0.608412884 0.644849775 0.647598395 0.649744708 0.674371232 0.678432288 0.686319560 0.692060745 0.693659960 0.700039829 0.704762326 0.718296538 0.742269182 0.751426474 0.759442045 0.770662588 0.773425142 0.779623148 0.811009230 0.816146776 0.819931705 0.822972456 0.823629288 0.831759861 0.834995801 0.837848398 0.842573669 0.845939029 0.847625409 0.850007100 0.859359397 0.865946870 0.867604404 0.874473397 0.886128070 0.886421432 0.889723206 0.900134205 0.901093541 0.904145739 0.923862669 0.928042127 0.936534312 0.937843110 0.966232675 0.976410142 0.986823959 1.001716861 1.020263320 1.028626556 1.042093580 1.051085267 1.057689311 1.068860772 1.086948673 1.088825737 1.104800917 1.108101672 1.112596776 1.126555206 1.135985910 1.140506357 1.144705275 1.176461675 1.179107377 1.181806698 1.187040070 1.191602213 1.197973973 1.224732257 1.228459442 1.274427421 1.302796662 1.321380184 1.328409788 1.333207564 1.336503542 1.338101488 1.342358280 1.343350353 1.345039996 1.359370675 1.379374289 1.383248259 1.385746032 1.410566892 1.420535631 1.431863434 1.551497715 1.685242543 1.776169347</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">278</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33542897" y3="0.06339577" z3="-0.19000307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38163928" y3="0.17480344" z3="0.42056147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64368462" y3="0.44934491" z3="-0.33957897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72931374" y3="1.2441887" z3="-2.26374102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38551605" y3="0.44737883" z3="-1.18384601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73270345" y3="0.85088203" z3="-3.66666043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63774991" y3="1.7545052" z3="-3.14152051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39065251" y3="2.59322416" z3="-4.63248725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56722658" y3="1.25316021" z3="-4.38383259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51342479" y3="2.92732007" z3="-5.19517174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92630381" y3="-0.47855572" z3="-3.43985175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09418238" y3="0.06100874" z3="-1.00172906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39815228" y3="-1.08579775" z3="-1.99876031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92625776" y3="-0.95378723" z3="-1.83038813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09940152" y3="-2.41004218" z3="-1.83756514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14585629" y3="-3.62025641" z3="0.68076105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01174628" y3="-5.23298318" z3="-4.74370165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24087739" y3="-4.98172219" z3="-3.70455086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84130152" y3="-4.30703942" z3="-1.08160284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78227304" y3="-4.57214895" z3="-2.85120398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55642288" y3="-5.08024512" z3="-3.24643989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85747968" y3="-4.73792563" z3="-1.93055624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4939586" y3="-4.24923794" z3="-1.52358134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81375327" y3="-4.48248564" z3="-3.19790221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35463129" y3="-5.39439432" z3="-3.92309327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8927902" y3="-4.78587177" z3="-1.58676949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03292182" y3="-3.86520796" z3="0.24105118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17428242" y3="-3.65491656" z3="0.88497878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06090908" y3="-4.11706524" z3="0.44886697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17104874" y3="-3.52371882" z3="2.35244607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23273471" y3="-3.34426046" z3="5.15068259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36841635" y3="-3.72799231" z3="3.05385175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00422274" y3="-3.23692871" z3="3.07646626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03226744" y3="-3.14750565" z3="4.4651428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3982098" y3="-3.64059165" z3="4.4428751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28378334" y3="-3.96416741" z3="2.50387157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04278697" y3="-3.10645179" z3="2.57386762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10276765" y3="-2.94414999" z3="5.00487489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33751843" y3="-3.81062207" z3="4.97638899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25446883" y3="-3.28240495" z3="6.24228426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41216577" y3="-3.88263114" z3="-0.61853405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17017846" y3="-3.37635397" z3="-1.06955912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52582521" y3="0.24770068" z3="-4.71706633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08367275" y3="-1.72735046" z3="0.02990754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91147831" y3="-0.97759624" z3="1.19289283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85416905" y3="-0.32143082" z3="1.52821803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37174845" y3="0.54019147" z3="1.22841164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45331298" y3="1.4549251" z3="-0.38921738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97333106" y3="-0.72529951" z3="1.3885104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33860685" y3="1.71873553" z3="2.6843419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88695866" y3="-0.97304934" z3="2.09037229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66124657" y3="-0.36027506" z3="3.35006564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22507407" y3="0.77083508" z3="-1.22435422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32852171" y3="2.23741989" z3="-0.38240118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42966381" y3="1.94878619" z3="-0.53900665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00587695" y3="-1.09736744" z3="2.42616279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94682818" y3="-0.26368117" z3="1.1494134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84310613" y3="-1.56140715" z3="0.68284206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39535023" y3="1.1708308" z3="3.64156877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60470177" y3="2.29488565" z3="2.68278317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17244234" y3="2.4421485" z3="2.64653222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79801409" y3="-0.81384159" z3="3.86242271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57586004" y3="-0.53830221" z3="3.93165808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49436439" y3="0.72257813" z3="3.23132685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83401957" y3="-0.69208367" z3="0.99309258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42033496" y3="-2.02333159" z3="0.8572916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76813298" y3="-2.67111211" z3="1.89913256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54618256" y3="-1.97452206" z3="3.08300443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01197236" y3="-0.6771238" z3="3.27571173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66413552" y3="-0.04282331" z3="2.22313176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5339216" y3="-2.52384114" z3="-0.10623571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38083762" y3="-3.68357441" z3="1.77739765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68421191" y3="-2.57744321" z3="4.10474455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81916281" y3="-0.16468259" z3="4.21848831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99759689" y3="0.99254225" z3="2.33643227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79023763" y3="0.47140147" z3="-4.29117682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77176358" y3="-0.49558493" z3="-4.46608947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42661737" y3="-1.6892473" z3="-5.08787974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14096574" y3="-1.92355509" z3="-5.56605735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83351036" y3="-0.95395978" z3="-5.37066409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0326864" y3="1.3967798" z3="-3.76271216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78976689" y3="-0.34702003" z3="-4.10490972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44082707" y3="-2.73651611" z3="-5.22635652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08745289" y3="-2.86579584" z3="-6.06488598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85458635" y3="-1.14279687" z3="-5.70569096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34767613" y3="-1.88399632" z3="5.0449077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31517934" y3="-3.72099707" z3="3.93716865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21908935" y3="-3.6403598" z3="-6.00370942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44326878" y3="-2.64706944" z3="-4.54576999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07172276" y3="1.16602906" z3="-1.49003511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11356228" y3="1.55522973" z3="-2.47092319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44219445" y3="1.48882796" z3="-1.68758828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8562654" y3="2.14820174" z3="-2.81889542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16629059" y3="1.19027125" z3="-0.92325387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91399134" y3="2.38487324" z3="-2.96311191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57790562" y3="2.21853235" z3="-3.64084483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91111259" y3="2.50636977" z3="-3.80998903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85861953" y3="2.49047214" z3="-4.41689145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24562425" y3="3.00966703" z3="-4.72136184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41053125" y3="3.15749724" z3="-3.34801601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29823521" y3="3.56754864" z3="-4.14084671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21921003" y3="4.17044388" z3="-2.75909745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97284981" y3="5.50242032" z3="-2.99303583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04527193" y3="3.88401009" z3="-2.10629452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61055178" y3="6.25968801" z3="-2.52796562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07749864" y3="4.95278652" z3="-4.37629551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89963693" y3="5.9029898" z3="-3.82381582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22855337" y3="5.24841792" z3="-5.00052095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71922056" y3="6.96543712" z3="-4.00963029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48116298" y3="-2.20625276" z3="-0.29151297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4501742" y3="-2.99768984" z3="-1.05998561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01062838" y3="-2.59020538" z3="0.59533468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09612878" y3="-1.3861647" z3="-0.70861139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17985862" y3="-1.42652436" z3="-1.13922035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3172122" y3="-0.38387522" z3="-1.48342926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10422855" y3="-1.55036823" z3="-0.93343974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4192337" y3="-2.07843983" z3="-1.99285183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3354,.0634,-.19;7.3816,.1748,.4206;6.6437,.4493,-.3396;4.7293,1.2442,-2.2637;4.3855,.4474,-1.1838;2.7327,.8509,-3.6667;3.6377,1.7545,-3.1415;1.3907,2.5932,-4.6325;1.5672,1.2532,-4.3838;.5134,2.9273,-5.1952;2.9263,-.4786,-3.4399;3.0942,.061,-1.0017;2.3982,-1.0858,-1.9988;.9263,-.9538,-1.8304;3.0994,-2.41,-1.8376;-.1459,-3.6203,.6808;-.0117,-5.233,-4.7437;-.2409,-4.9817,-3.7046;-.8413,-4.307,-1.0816;.7823,-4.5721,-2.8512;-1.5564,-5.0802,-3.2464;-1.8575,-4.7379,-1.9306;.494,-4.2492,-1.5236;1.8138,-4.4825,-3.1979;-2.3546,-5.3944,-3.9231;-2.8928,-4.7859,-1.5868;-1.0329,-3.8652,.2411;-2.1743,-3.6549,.885;-3.0609,-4.1171,.4489;-2.171,-3.5237,2.3524;-2.2327,-3.3443,5.1507;-3.3684,-3.728,3.0539;-1.0042,-3.2369,3.0765;-1.0323,-3.1475,4.4651;-3.3982,-3.6406,4.4429;-4.2838,-3.9642,2.5039;-.0428,-3.1065,2.5739;-.1028,-2.9441,5.0049;-4.3375,-3.8106,4.9764;-2.2545,-3.2824,6.2423;1.4122,-3.8826,-.6185;2.1702,-3.3764,-1.0696;.5258,.2477,-4.7171;-3.0837,-1.7274,.0299;-2.9115,-.9776,1.1929;-1.8542,-.3214,1.5282;-.3717,.5402,1.2284;-.4533,1.4549,-.3892;.9733,-.7253,1.3885;-.3386,1.7187,2.6843;-3.887,-.973,2.0904;-3.6612,-.3603,3.3501;-.2251,.7708,-1.2244;.3285,2.2374,-.3824;-1.4297,1.9488,-.539;1.0059,-1.0974,2.4262;1.9468,-.2637,1.1494;.8431,-1.5614,.6828;-.3954,1.1708,3.6416;.6047,2.2949,2.6828;-1.1724,2.4421,2.6465;-2.798,-.8138,3.8624;-4.5759,-.5383,3.9317;-3.4944,.7226,3.2313;4.834,-.6921,.9931;4.4203,-2.0233,.8573;3.7681,-2.6711,1.8991;3.5462,-1.9745,3.083;4.012,-.6771,3.2757;4.6641,-.0428,2.2231;4.5339,-2.5238,-.1062;3.3808,-3.6836,1.7774;2.6842,-2.5774,4.1047;3.8192,-.1647,4.2185;4.9976,.9925,2.3364;-.7902,.4714,-4.2912;-1.7718,-.4956,-4.4661;-1.4266,-1.6892,-5.0879;-.141,-1.9236,-5.5661;.8335,-.954,-5.3707;-1.0327,1.3968,-3.7627;-2.7898,-.347,-4.1049;-2.4408,-2.7365,-5.2264;.0875,-2.8658,-6.0649;1.8546,-1.1428,-5.7057;2.3477,-1.884,5.0449;2.3152,-3.721,3.9372;-2.2191,-3.6404,-6.0037;-3.4433,-2.6471,-4.5458;7.0717,1.166,-1.49;6.1136,1.5552,-2.4709;8.4422,1.4888,-1.6876;8.8563,2.1482,-2.8189;9.1663,1.1903,-.9233;9.914,2.3849,-2.9631;6.5779,2.2185,-3.6408;7.9111,2.5064,-3.81;5.8586,2.4905,-4.4169;8.2456,3.0097,-4.7214;3.4105,3.1575,-3.348;2.2982,3.5675,-4.1408;4.2192,4.1704,-2.7591;3.9728,5.5024,-2.993;5.0453,3.884,-2.1063;4.6106,6.2597,-2.528;2.0775,4.9528,-4.3763;2.8996,5.903,-3.8238;1.2286,5.2484,-5.0005;2.7192,6.9654,-4.0096;-4.4812,-2.2063,-.2915;-4.4502,-2.9977,-1.06;-5.0106,-2.5902,.5953;-5.0961,-1.3862,-.7086;-2.1799,-1.4265,-1.1392;-2.3172,-.3839,-1.4834;-1.1042,-1.5504,-.9334;-2.4192,-2.0784,-1.9929;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416220846</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001479472371 0.000258421356 0.017419835134 0.005348977702</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030706751 -0.000470497 0.000069301 0.000188757 0.000232770 0.000357819 0.000411198 0.000587457 0.000716866 0.000861327 0.001024573 0.001151230 0.001229837 0.001336294 0.001428320 0.001475981 0.001547126 0.001704532 0.001810025 0.001889695 0.002151668 0.002339619 0.002434328 0.002575717 0.002676036 0.003006129 0.003101872 0.003364945 0.003519625 0.003896027 0.004456948 0.004690291 0.004755677 0.005080947 0.006053330 0.006102935 0.006304455 0.006654256 0.006988859 0.007704515 0.008113607 0.008169254 0.008336919 0.009368160 0.009939940 0.010150772 0.010642788 0.011124937 0.011953699 0.012138852 0.012943595 0.013125923 0.014168695 0.014604981 0.015341290 0.015532809 0.015932245 0.016566573 0.016784203 0.017523472 0.018163376 0.018653350 0.019410858 0.019603574 0.020135280 0.020710906 0.021251810 0.021436653 0.022396364 0.023128711 0.024050607 0.026398841 0.026844910 0.027793611 0.027846305 0.029557114 0.030339815 0.031606862 0.033292181 0.033660669 0.034131807 0.035797747 0.037115649 0.037483834 0.039527277 0.040035393 0.040544884 0.040988223 0.042565097 0.044682972 0.045519572 0.047117889 0.048012832 0.049272323 0.050492950 0.051054777 0.051244310 0.051621065 0.052489068 0.052696933 0.052933225 0.053129456 0.054742242 0.054974036 0.056043771 0.056277117 0.056566428 0.056857985 0.057225888 0.059172212 0.060571194 0.061046448 0.061734232 0.062405484 0.063396442 0.064533134 0.065321874 0.065987610 0.066602992 0.068364231 0.069126881 0.070278965 0.072752948 0.074403633 0.074789693 0.076519685 0.078660416 0.084292311 0.086821798 0.087146336 0.087629087 0.089347076 0.090617515 0.091481724 0.094051352 0.094981556 0.095798514 0.096443769 0.097852839 0.098831828 0.099655598 0.100212558 0.100939056 0.102487853 0.103217732 0.103619632 0.104431540 0.104579424 0.106347047 0.107010609 0.108169447 0.109855150 0.111060590 0.112425026 0.113541950 0.115033181 0.116262031 0.116830408 0.118718526 0.121018235 0.122403337 0.123207069 0.124769798 0.126196662 0.126320304 0.126674671 0.127294842 0.132092511 0.135083101 0.135835483 0.142847385 0.143854417 0.147081336 0.147567046 0.149754666 0.152208444 0.154701089 0.155183200 0.156654116 0.161517538 0.161953122 0.173776069 0.174265228 0.181595829 0.184874018 0.186453678 0.189643900 0.190416288 0.194170658 0.195396566 0.198718825 0.200315888 0.205263043 0.207066570 0.207384419 0.210253059 0.216478248 0.216981767 0.217970602 0.219360128 0.220849992 0.225296830 0.226713852 0.232375305 0.235161588 0.235710196 0.236016047 0.244689834 0.256097576 0.257287232 0.263951923 0.269969969 0.280742532 0.283349156 0.286348835 0.291913155 0.296992211 0.304422732 0.305891105 0.307324174 0.314481799 0.316775866 0.317410420 0.322237908 0.330111765 0.332880175 0.351831825 0.352809855 0.355098016 0.355864593 0.360079321 0.363043839 0.364311709 0.384150951 0.386057919 0.392206156 0.410591082 0.425992443 0.431177318 0.462460980 0.469139928 0.478802099 0.484363739 0.484561401 0.487589440 0.491485624 0.509670247 0.515604508 0.535427150 0.569294513 0.575200528 0.591710043 0.594081766 0.607352497 0.608412616 0.644884145 0.647599378 0.649748666 0.674387339 0.678433079 0.686379090 0.692088421 0.693661106 0.700038815 0.704767492 0.718300935 0.742269988 0.751426472 0.759442400 0.770815109 0.773502774 0.779628092 0.811009278 0.816202932 0.819951922 0.822978272 0.823629662 0.831765984 0.834996109 0.837849113 0.842577968 0.845942974 0.847647124 0.850013372 0.859381517 0.865947248 0.867758554 0.874502337 0.886145060 0.886488357 0.889723410 0.900159755 0.901095273 0.904154336 0.923862650 0.928048365 0.936540408 0.937857127 0.966232862 0.976410595 0.986843190 1.001717030 1.020263413 1.028652528 1.042110408 1.051128848 1.057698205 1.068862063 1.086956309 1.088830683 1.104823019 1.108101980 1.112600495 1.126713551 1.135986971 1.140526459 1.144714225 1.176466881 1.179107273 1.181808516 1.187040216 1.191604677 1.198017107 1.224733367 1.228487059 1.274429536 1.302798103 1.321383557 1.328409976 1.333210508 1.336510380 1.338102661 1.342354105 1.343348180 1.345040618 1.359420318 1.379423180 1.383247537 1.385762497 1.410564415 1.420538492 1.431864327 1.551501455 1.685308679 1.776173948</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">279</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33864597" y3="0.06247901" z3="-0.19105294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38581582" y3="0.17241248" z3="0.41502403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64662554" y3="0.44816633" z3="-0.3431791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72864078" y3="1.24383327" z3="-2.26321454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3871215" y3="0.44652898" z3="-1.18309194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73072761" y3="0.84801269" z3="-3.66321823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63490256" y3="1.7529616" z3="-3.13888061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38351442" y3="2.58900351" z3="-4.62434385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56336487" y3="1.24897541" z3="-4.37801101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50457741" y3="2.92188688" z3="-5.18518726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9274697" y3="-0.48143036" z3="-3.43713053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09635978" y3="0.05884729" z3="-0.99931224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40027377" y3="-1.08865696" z3="-1.99543145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92844089" y3="-0.95635368" z3="-1.82646321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10169558" y3="-2.41262349" z3="-1.83382597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14735284" y3="-3.6247824" z3="0.68108424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00668338" y3="-5.23943406" z3="-4.74216535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23795079" y3="-4.98599432" z3="-3.70407796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84204362" y3="-4.30736959" z3="-1.08346454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78351518" y3="-4.57523148" z3="-2.84985205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55386133" y3="-5.08348618" z3="-3.24830474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85674834" y3="-4.73882733" z3="-1.93341556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49365422" y3="-4.2506664" z3="-1.52307085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81723942" y3="-4.49048884" z3="-3.19544196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34972301" y3="-5.39950679" z3="-3.92560124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89423585" y3="-4.7818175" z3="-1.59097578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03519496" y3="-3.86488606" z3="0.23883994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17694334" y3="-3.65059365" z3="0.88113275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06506736" y3="-4.10974426" z3="0.44390063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17518512" y3="-3.51894851" z3="2.34847898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23895089" y3="-3.33892915" z3="5.14664536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.37416658" y3="-3.71937189" z3="3.04839206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00809463" y3="-3.23538673" z3="3.07380073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03737279" y3="-3.14528843" z3="4.46244095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40509469" y3="-3.63165175" z3="4.43739652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28862834" y3="-3.95428801" z3="2.49746512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04673803" y3="-3.1061292" z3="2.57232727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10853014" y3="-2.9429247" z3="5.00294022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34511073" y3="-3.7996204" z3="4.96983975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26160917" y3="-3.27666168" z3="6.23824271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41074594" y3="-3.88454414" z3="-0.61680896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17170272" y3="-3.38023902" z3="-1.06703068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52359921" y3="0.24219746" z3="-4.71313816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08017288" y3="-1.72065001" z3="0.02573737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90829852" y3="-0.97123117" z3="1.1888313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84868437" y3="-0.31933231" z3="1.52663121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36454492" y3="0.5392326" z3="1.23187334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44146031" y3="1.45795679" z3="-0.38373608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97746306" y3="-0.72940327" z3="1.39010302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32960647" y3="1.7121435" z3="2.69192742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88620845" y3="-0.96295529" z3="2.08336615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66161206" y3="-0.35123274" z3="3.34378716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21689455" y3="0.77446535" z3="-1.22033914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3442035" y3="2.23647182" z3="-0.37568694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41534219" y3="1.95726843" z3="-0.53221758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00890502" y3="-1.1036049" z3="2.42664263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95116989" y3="-0.26848527" z3="1.15252962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84598671" y3="-1.56321129" z3="0.68181233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.3895035" y3="1.15951158" z3="3.64646425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61579888" y3="2.28486408" z3="2.69440612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16093646" y3="2.43862465" z3="2.65626009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80156514" y3="-0.80973028" z3="3.8583638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57877483" y3="-0.52551489" z3="3.92162144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48925216" y3="0.73125975" z3="3.22599825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83790231" y3="-0.69243885" z3="0.99258093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42615457" y3="-2.02428036" z3="0.85798972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77363044" y3="-2.67144225" z3="1.9001243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55012501" y3="-1.97385008" z3="3.08373749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01385171" y3="-0.67582916" z3="3.27502529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66598109" y3="-0.04205389" z3="2.22192242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54268435" y3="-2.52613658" z3="-0.10363806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38820285" y3="-3.68444017" z3="1.77958565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68587143" y3="-2.57563621" z3="4.1043758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81994409" y3="-0.16281383" z3="4.21795348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99735559" y3="0.99386626" z3="2.33401274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79362798" y3="0.46447935" z3="-4.28974473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77406907" y3="-0.50254298" z3="-4.46569102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42691318" y3="-1.69561636" z3="-5.08980497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14025163" y3="-1.92890364" z3="-5.56552975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83343872" y3="-0.95866062" z3="-5.36516183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03800184" y3="1.38922041" z3="-3.760237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79291563" y3="-0.35506709" z3="-4.10629118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4400492" y3="-2.74351093" z3="-5.23058079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0891673" y3="-2.87047391" z3="-6.06432532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85564051" y3="-1.14612555" z3="-5.6985507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34985978" y3="-1.88241142" z3="5.04442582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31287839" y3="-3.71805366" z3="3.93417179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21726069" y3="-3.6456931" z3="-6.00907244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44294179" y3="-2.65649437" z3="-4.54993056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07234764" y3="1.1659332" z3="-1.4940631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11221712" y3="1.55601735" z3="-2.47260927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44222439" y3="1.48918236" z3="-1.69441065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85356868" y3="2.14968376" z3="-2.82597088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1683274" y3="1.19056981" z3="-0.93192361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91106019" y3="2.38773267" z3="-2.97201714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5737983" y3="2.22120155" z3="-3.64264817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90632886" y3="2.50912836" z3="-3.81452532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85293554" y3="2.49451479" z3="-4.41662531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23868559" y3="3.0145521" z3="-4.72584488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40438273" y3="3.15585131" z3="-3.34274299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28957772" y3="3.56464672" z3="-4.13261468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21219234" y3="4.16947873" z3="-2.75394186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96199395" y3="5.50131761" z3="-2.9845629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04075823" y3="3.88347843" z3="-2.10407513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5992198" y3="6.25894939" z3="-2.51989959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06509517" y3="4.94949196" z3="-4.36511714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88560582" y3="5.90105114" z3="-3.81171834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21387695" y3="5.2442624" z3="-4.98668891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70180072" y3="6.96349236" z3="-3.99457282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47774677" y3="-2.19686024" z3="-0.29837182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44602864" y3="-2.98795253" z3="-1.06649862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00966456" y3="-2.58002136" z3="0.58732411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09020903" y3="-1.37591751" z3="-0.71702396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17432904" y3="-1.42179018" z3="-1.1425579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31168437" y3="-0.38173564" z3="-1.48936751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09723363" y3="-1.54761934" z3="-0.93761985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41311215" y3="-2.07493877" z3="-1.99533437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3386,.0625,-.1911;7.3858,.1724,.415;6.6466,.4482,-.3432;4.7286,1.2438,-2.2632;4.3871,.4465,-1.1831;2.7307,.848,-3.6632;3.6349,1.753,-3.1389;1.3835,2.589,-4.6243;1.5634,1.249,-4.378;.5046,2.9219,-5.1852;2.9275,-.4814,-3.4371;3.0964,.0588,-.9993;2.4003,-1.0887,-1.9954;.9284,-.9564,-1.8265;3.1017,-2.4126,-1.8338;-.1474,-3.6248,.6811;-.0067,-5.2394,-4.7422;-.238,-4.986,-3.7041;-.842,-4.3074,-1.0835;.7835,-4.5752,-2.8499;-1.5539,-5.0835,-3.2483;-1.8567,-4.7388,-1.9334;.4937,-4.2507,-1.5231;1.8172,-4.4905,-3.1954;-2.3497,-5.3995,-3.9256;-2.8942,-4.7818,-1.591;-1.0352,-3.8649,.2388;-2.1769,-3.6506,.8811;-3.0651,-4.1097,.4439;-2.1752,-3.5189,2.3485;-2.239,-3.3389,5.1466;-3.3742,-3.7194,3.0484;-1.0081,-3.2354,3.0738;-1.0374,-3.1453,4.4624;-3.4051,-3.6317,4.4374;-4.2886,-3.9543,2.4975;-.0467,-3.1061,2.5723;-.1085,-2.9429,5.0029;-4.3451,-3.7996,4.9698;-2.2616,-3.2767,6.2382;1.4107,-3.8845,-.6168;2.1717,-3.3802,-1.067;.5236,.2422,-4.7131;-3.0802,-1.7207,.0257;-2.9083,-.9712,1.1888;-1.8487,-.3193,1.5266;-.3645,.5392,1.2319;-.4415,1.458,-.3837;.9775,-.7294,1.3901;-.3296,1.7121,2.6919;-3.8862,-.963,2.0834;-3.6616,-.3512,3.3438;-.2169,.7745,-1.2203;.3442,2.2365,-.3757;-1.4153,1.9573,-.5322;1.0089,-1.1036,2.4266;1.9512,-.2685,1.1525;.846,-1.5632,.6818;-.3895,1.1595,3.6465;.6158,2.2849,2.6944;-1.1609,2.4386,2.6563;-2.8016,-.8097,3.8584;-4.5788,-.5255,3.9216;-3.4893,.7313,3.226;4.8379,-.6924,.9926;4.4262,-2.0243,.858;3.7736,-2.6714,1.9001;3.5501,-1.9739,3.0837;4.0139,-.6758,3.275;4.666,-.0421,2.2219;4.5427,-2.5261,-.1036;3.3882,-3.6844,1.7796;2.6859,-2.5756,4.1044;3.8199,-.1628,4.218;4.9974,.9939,2.334;-.7936,.4645,-4.2897;-1.7741,-.5025,-4.4657;-1.4269,-1.6956,-5.0898;-.1403,-1.9289,-5.5655;.8334,-.9587,-5.3652;-1.038,1.3892,-3.7602;-2.7929,-.3551,-4.1063;-2.44,-2.7435,-5.2306;.0892,-2.8705,-6.0643;1.8556,-1.1461,-5.6986;2.3499,-1.8824,5.0444;2.3129,-3.7181,3.9342;-2.2173,-3.6457,-6.0091;-3.4429,-2.6565,-4.5499;7.0723,1.1659,-1.4941;6.1122,1.556,-2.4726;8.4422,1.4892,-1.6944;8.8536,2.1497,-2.826;9.1683,1.1906,-.9319;9.9111,2.3877,-2.972;6.5738,2.2212,-3.6426;7.9063,2.5091,-3.8145;5.8529,2.4945,-4.4166;8.2387,3.0146,-4.7258;3.4044,3.1559,-3.3427;2.2896,3.5646,-4.1326;4.2122,4.1695,-2.7539;3.962,5.5013,-2.9846;5.0408,3.8835,-2.1041;4.5992,6.2589,-2.5199;2.0651,4.9495,-4.3651;2.8856,5.9011,-3.8117;1.2139,5.2443,-4.9867;2.7018,6.9635,-3.9946;-4.4777,-2.1969,-.2984;-4.446,-2.988,-1.0665;-5.0097,-2.58,.5873;-5.0902,-1.3759,-.717;-2.1743,-1.4218,-1.1426;-2.3117,-.3817,-1.4894;-1.0972,-1.5476,-.9376;-2.4131,-2.0749,-1.9953;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412172672</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001531616978 0.000261832926 0.022819341153 0.005348216189</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030709679 -0.000329129 0.000160926 0.000177218 0.000222613 0.000357408 0.000411384 0.000587327 0.000716367 0.000860096 0.001022574 0.001135468 0.001229404 0.001337578 0.001425811 0.001476995 0.001546117 0.001705018 0.001816120 0.001890359 0.002149920 0.002338066 0.002434089 0.002575346 0.002676073 0.003007002 0.003107692 0.003363686 0.003520353 0.003898538 0.004457918 0.004690620 0.004761458 0.005081723 0.006053420 0.006104688 0.006311346 0.006655277 0.006993154 0.007711586 0.008125982 0.008177606 0.008340611 0.009370883 0.009946799 0.010152988 0.010642155 0.011134124 0.011953860 0.012141587 0.012956060 0.013130956 0.014169334 0.014617104 0.015347042 0.015532956 0.015932071 0.016566262 0.016784139 0.017523378 0.018166618 0.018653142 0.019411503 0.019613952 0.020146487 0.020711531 0.021254005 0.021445565 0.022396339 0.023128733 0.024050140 0.026399270 0.026849068 0.027804757 0.027864705 0.029557934 0.030342486 0.031606726 0.033292189 0.033661185 0.034133251 0.035797711 0.037126644 0.037483804 0.039527302 0.040038549 0.040545279 0.040988144 0.042567059 0.044682924 0.045521266 0.047117979 0.048017700 0.049273518 0.050494064 0.051058433 0.051247636 0.051622806 0.052489203 0.052696937 0.052935354 0.053139365 0.054743611 0.054976006 0.056044066 0.056278472 0.056567169 0.056881527 0.057226502 0.059175589 0.060572239 0.061049522 0.061737950 0.062406864 0.063406465 0.064534872 0.065321767 0.065987846 0.066606735 0.068367033 0.069134356 0.070279008 0.072753988 0.074406232 0.074789908 0.076520316 0.078671896 0.084307031 0.086823716 0.087148462 0.087629242 0.089347637 0.090624386 0.091483167 0.094053293 0.094985645 0.095800203 0.096445784 0.097853440 0.098833908 0.099742008 0.100213768 0.100939425 0.102488021 0.103217769 0.103621001 0.104439267 0.104579766 0.106347674 0.107016080 0.108169608 0.109862659 0.111063452 0.112426716 0.113543161 0.115034154 0.116263990 0.116830389 0.118720264 0.121069310 0.122412106 0.123224166 0.124825148 0.126199976 0.126322779 0.126680783 0.127303093 0.132101175 0.135083413 0.135837008 0.142849191 0.143857981 0.147082187 0.147572790 0.149754908 0.152208150 0.154703567 0.155182752 0.156656248 0.161516978 0.161966144 0.173778406 0.174267304 0.181602088 0.184878442 0.186457073 0.189644987 0.190417070 0.194171692 0.195399412 0.198724003 0.200319531 0.205262853 0.207069393 0.207387241 0.210254009 0.216489291 0.217008251 0.217971024 0.219418694 0.220850471 0.225297388 0.226714451 0.232380526 0.235170410 0.235710357 0.236026322 0.244690404 0.256103170 0.257287670 0.263951909 0.269974399 0.280745486 0.283355988 0.286352455 0.291913491 0.296997954 0.304422795 0.305911110 0.307324696 0.314484878 0.316778132 0.317411308 0.322240243 0.330114493 0.332887540 0.351831880 0.352818853 0.355099325 0.355864647 0.360081122 0.363044251 0.364315900 0.384150823 0.386058026 0.392211117 0.410590976 0.425992542 0.431177764 0.462461515 0.469141130 0.478837633 0.484368178 0.484591389 0.487597091 0.491486031 0.509673138 0.515604979 0.535427103 0.569296872 0.575207861 0.591711533 0.594082729 0.607353781 0.608412698 0.644905225 0.647599731 0.649751789 0.674393934 0.678435264 0.686440130 0.692122543 0.693661053 0.700040508 0.704767765 0.718301530 0.742270629 0.751426790 0.759443314 0.770950720 0.773585268 0.779630396 0.811009441 0.816266028 0.819961989 0.822980146 0.823630403 0.831779218 0.835000858 0.837850854 0.842579411 0.845943992 0.847656253 0.850025602 0.859405089 0.865947391 0.867957455 0.874519560 0.886148128 0.886580359 0.889727976 0.900195987 0.901095558 0.904161657 0.923863139 0.928049927 0.936548848 0.937868863 0.966233235 0.976410602 0.986862888 1.001717185 1.020263432 1.028667649 1.042138993 1.051203844 1.057724121 1.068866699 1.086962912 1.088831471 1.104836054 1.108102429 1.112601103 1.126874836 1.135988080 1.140563704 1.144729607 1.176471418 1.179107831 1.181808649 1.187040645 1.191606991 1.198057521 1.224733638 1.228533830 1.274430142 1.302798451 1.321384775 1.328410126 1.333211204 1.336513440 1.338102577 1.342354681 1.343348478 1.345041798 1.359465062 1.379469473 1.383247555 1.385764547 1.410563555 1.420539243 1.431865075 1.551503787 1.685369779 1.776214483</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">280</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34191556" y3="0.05627007" z3="-0.19241009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39004014" y3="0.17039795" z3="0.41197682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64923457" y3="0.44476261" z3="-0.34546186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72760644" y3="1.23986815" z3="-2.26222916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38862102" y3="0.44009144" z3="-1.18304245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72810005" y3="0.84496796" z3="-3.66048365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63191266" y3="1.74971902" z3="-3.13509017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37735071" y3="2.58646767" z3="-4.61538498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55939733" y3="1.24594542" z3="-4.37321159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49744347" y3="2.91968472" z3="-5.17441431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92603731" y3="-0.4845233" z3="-3.43706073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09857902" y3="0.05098734" z3="-0.99821844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40162209" y3="-1.09474802" z3="-1.99571542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93001025" y3="-0.96329768" z3="-1.8241631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10355614" y3="-2.4189063" z3="-1.83774269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14706578" y3="-3.61582505" z3="0.67527332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00498796" y3="-5.25130196" z3="-4.74201036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23602517" y3="-4.99464416" z3="-3.7045495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84092827" y3="-4.3067262" z3="-1.08579118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78626355" y3="-4.58486726" z3="-2.85027845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55299127" y3="-5.08677688" z3="-3.24926522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85643201" y3="-4.73734183" z3="-1.93567586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4957692" y3="-4.25577146" z3="-1.52466223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81901861" y3="-4.50047713" z3="-3.19461688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35033159" y3="-5.40158598" z3="-3.92644904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89298087" y3="-4.77977223" z3="-1.5946503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03385859" y3="-3.86005548" z3="0.23512945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17539799" y3="-3.64672116" z3="0.87744536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.062502" y3="-4.10662896" z3="0.44028681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17386879" y3="-3.51387023" z3="2.34466374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23890836" y3="-3.33104606" z3="5.14251147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3726613" y3="-3.71445683" z3="3.04455222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00743332" y3="-3.22876368" z3="3.06993713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0370269" y3="-3.13778801" z3="4.45846907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.40419416" y3="-3.62532768" z3="4.43338038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28776763" y3="-3.94897528" z3="2.49348125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0453464" y3="-3.10022043" z3="2.56864816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1076437" y3="-2.93599323" z3="4.99919453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.34488527" y3="-3.7920937" z3="4.96575514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.26202727" y3="-3.26793179" z3="6.23399207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41332346" y3="-3.88980702" z3="-0.61865529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17291242" y3="-3.38557212" z3="-1.06920677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52068157" y3="0.23883846" z3="-4.70953619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07836844" y3="-1.71600359" z3="0.02100728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90527743" y3="-0.96724608" z3="1.18431528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84483598" y3="-0.31768538" z3="1.52267071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36201834" y3="0.54439842" z3="1.22999925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43669611" y3="1.45850239" z3="-0.38817953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98203421" y3="-0.72153597" z3="1.39469116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33477536" y3="1.72211215" z3="2.68655855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88313615" y3="-0.95739307" z3="2.07910668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65820606" y3="-0.34452161" z3="3.33861859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20783532" y3="0.77314255" z3="-1.22198664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34613249" y3="2.2396457" z3="-0.38014868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41167785" y3="1.95372786" z3="-0.54107335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01191222" y3="-1.09229818" z3="2.43250771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95639201" y3="-0.26142247" z3="1.1566569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85185828" y3="-1.55822326" z3="0.6895959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39305963" y3="1.17322223" z3="3.64311623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60725288" y3="2.3000335" z3="2.68779487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16982415" y3="2.44370752" z3="2.64757198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79979361" y3="-0.8029251" z3="3.85466442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57604206" y3="-0.51612985" z3="3.91675911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48403552" y3="0.73730213" z3="3.21938464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84306445" y3="-0.6992454" z3="0.99178937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42735479" y3="-2.02985297" z3="0.85704136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77366252" y3="-2.67554333" z3="1.89926162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55309597" y3="-1.97788283" z3="3.08289547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02207817" y3="-0.68166975" z3="3.27502119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67493807" y3="-0.0492434" z3="2.22167257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.54063388" y3="-2.53151181" z3="-0.1055538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38399911" y3="-3.68714638" z3="1.77787535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68804679" y3="-2.57754086" z3="4.10405916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83044241" y3="-0.16831147" z3="4.21759038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00974686" y3="0.98564938" z3="2.33407187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79701845" y3="0.45950541" z3="-4.28663154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77652704" y3="-0.50869639" z3="-4.46595612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42763759" y3="-1.70085986" z3="-5.08865004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14026911" y3="-1.93213508" z3="-5.5637479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83201071" y3="-0.96117734" z3="-5.36426098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04255479" y3="1.38344508" z3="-3.75711117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79579407" y3="-0.36240274" z3="-4.10731854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43930704" y3="-2.74997618" z3="-5.23016122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09109289" y3="-2.87314271" z3="-6.06341239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85433425" y3="-1.14754267" z3="-5.6971215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.355925" y3="-1.88405252" z3="5.04552679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3117195" y3="-3.71838062" z3="3.93413479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21615324" y3="-3.64962168" z3="-6.01180212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.440965" y3="-2.66660223" z3="-4.54766721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07246049" y3="1.16431573" z3="-1.49604101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1104606" y3="1.55429324" z3="-2.47291609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44168097" y3="1.49002742" z3="-1.69742423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85076721" y3="2.15356324" z3="-2.82819074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16896449" y3="1.19066274" z3="-0.93643842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90756831" y3="2.39265109" z3="-2.97524826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56957462" y3="2.22197417" z3="-3.64238038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90171756" y3="2.5131835" z3="-3.8150066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84719983" y3="2.49487881" z3="-4.41520902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23225603" y3="3.01998567" z3="-4.72589085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39910309" y3="3.15273723" z3="-3.33471601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28230753" y3="3.56218213" z3="-4.12144455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20606149" y3="4.16585041" z3="-2.74375214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95275019" y3="5.4980208" z3="-2.96901855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03612192" y3="3.87928494" z3="-2.09607341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.5888211" y3="6.25558429" z3="-2.50206992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05463547" y3="4.94760794" z3="-4.34836568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87431984" y3="5.89844497" z3="-3.79311122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20203175" y3="5.24286815" z3="-4.9677489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68813435" y3="6.96110102" z3="-3.97175348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47666449" y3="-2.18998565" z3="-0.30333262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44647433" y3="-2.98098553" z3="-1.07206612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00920709" y3="-2.57273566" z3="0.58202859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08808567" y3="-1.36769872" z3="-0.72132166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17057923" y3="-1.41981337" z3="-1.14589515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30440815" y3="-0.37763288" z3="-1.49283541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09572664" y3="-1.54521618" z3="-0.93704354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40917803" y3="-2.07313826" z3="-1.99867124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3419,.0563,-.1924;7.39,.1704,.412;6.6492,.4448,-.3455;4.7276,1.2399,-2.2622;4.3886,.4401,-1.183;2.7281,.845,-3.6605;3.6319,1.7497,-3.1351;1.3774,2.5865,-4.6154;1.5594,1.2459,-4.3732;.4974,2.9197,-5.1744;2.926,-.4845,-3.4371;3.0986,.051,-.9982;2.4016,-1.0947,-1.9957;.93,-.9633,-1.8242;3.1036,-2.4189,-1.8377;-.1471,-3.6158,.6753;-.005,-5.2513,-4.742;-.236,-4.9946,-3.7045;-.8409,-4.3067,-1.0858;.7863,-4.5849,-2.8503;-1.553,-5.0868,-3.2493;-1.8564,-4.7373,-1.9357;.4958,-4.2558,-1.5247;1.819,-4.5005,-3.1946;-2.3503,-5.4016,-3.9264;-2.893,-4.7798,-1.5947;-1.0339,-3.8601,.2351;-2.1754,-3.6467,.8774;-3.0625,-4.1066,.4403;-2.1739,-3.5139,2.3447;-2.2389,-3.331,5.1425;-3.3727,-3.7145,3.0446;-1.0074,-3.2288,3.0699;-1.037,-3.1378,4.4585;-3.4042,-3.6253,4.4334;-4.2878,-3.949,2.4935;-.0453,-3.1002,2.5686;-.1076,-2.936,4.9992;-4.3449,-3.7921,4.9658;-2.262,-3.2679,6.234;1.4133,-3.8898,-.6187;2.1729,-3.3856,-1.0692;.5207,.2388,-4.7095;-3.0784,-1.716,.021;-2.9053,-.9672,1.1843;-1.8448,-.3177,1.5227;-.362,.5444,1.23;-.4367,1.4585,-.3882;.982,-.7215,1.3947;-.3348,1.7221,2.6866;-3.8831,-.9574,2.0791;-3.6582,-.3445,3.3386;-.2078,.7731,-1.222;.3461,2.2396,-.3801;-1.4117,1.9537,-.5411;1.0119,-1.0923,2.4325;1.9564,-.2614,1.1567;.8519,-1.5582,.6896;-.3931,1.1732,3.6431;.6073,2.3,2.6878;-1.1698,2.4437,2.6476;-2.7998,-.8029,3.8547;-4.576,-.5161,3.9168;-3.484,.7373,3.2194;4.8431,-.6992,.9918;4.4274,-2.0299,.857;3.7737,-2.6755,1.8993;3.5531,-1.9779,3.0829;4.0221,-.6817,3.275;4.6749,-.0492,2.2217;4.5406,-2.5315,-.1056;3.384,-3.6871,1.7779;2.688,-2.5775,4.1041;3.8304,-.1683,4.2176;5.0097,.9856,2.3341;-.797,.4595,-4.2866;-1.7765,-.5087,-4.466;-1.4276,-1.7009,-5.0887;-.1403,-1.9321,-5.5637;.832,-.9612,-5.3643;-1.0426,1.3834,-3.7571;-2.7958,-.3624,-4.1073;-2.4393,-2.75,-5.2302;.0911,-2.8731,-6.0634;1.8543,-1.1475,-5.6971;2.3559,-1.8841,5.0455;2.3117,-3.7184,3.9341;-2.2162,-3.6496,-6.0118;-3.441,-2.6666,-4.5477;7.0725,1.1643,-1.496;6.1105,1.5543,-2.4729;8.4417,1.49,-1.6974;8.8508,2.1536,-2.8282;9.169,1.1907,-.9364;9.9076,2.3927,-2.9752;6.5696,2.222,-3.6424;7.9017,2.5132,-3.815;5.8472,2.4949,-4.4152;8.2323,3.02,-4.7259;3.3991,3.1527,-3.3347;2.2823,3.5622,-4.1214;4.2061,4.1659,-2.7438;3.9528,5.498,-2.969;5.0361,3.8793,-2.0961;4.5888,6.2556,-2.5021;2.0546,4.9476,-4.3484;2.8743,5.8984,-3.7931;1.202,5.2429,-4.9677;2.6881,6.9611,-3.9718;-4.4767,-2.19,-.3033;-4.4465,-2.981,-1.0721;-5.0092,-2.5727,.582;-5.0881,-1.3677,-.7213;-2.1706,-1.4198,-1.1459;-2.3044,-.3776,-1.4928;-1.0957,-1.5452,-.937;-2.4092,-2.0731,-1.9987;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416061608</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001357307715 0.000233685308 0.023569197202 0.005331790208</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030711572 -0.000371173 0.000118088 0.000209939 0.000232695 0.000357356 0.000411858 0.000587293 0.000716193 0.000862496 0.001022051 0.001140513 0.001229473 0.001342498 0.001431088 0.001481580 0.001551767 0.001708554 0.001819812 0.001890308 0.002150948 0.002342577 0.002433986 0.002575280 0.002676327 0.003009852 0.003111009 0.003363369 0.003522438 0.003902141 0.004458377 0.004691214 0.004761889 0.005081524 0.006053431 0.006105931 0.006313356 0.006654926 0.006994497 0.007714280 0.008129541 0.008177108 0.008347862 0.009372776 0.009947707 0.010152678 0.010642108 0.011140449 0.011954015 0.012146385 0.012971530 0.013136055 0.014169893 0.014635961 0.015351162 0.015535123 0.015931991 0.016566549 0.016785140 0.017523139 0.018167366 0.018653738 0.019412748 0.019620034 0.020156383 0.020711797 0.021256295 0.021451211 0.022396276 0.023128699 0.024050068 0.026399431 0.026853993 0.027808536 0.027889210 0.029558325 0.030345160 0.031606694 0.033292201 0.033661055 0.034133204 0.035797685 0.037135070 0.037483780 0.039527261 0.040039450 0.040545667 0.040988798 0.042568292 0.044682721 0.045521227 0.047118437 0.048021451 0.049273981 0.050496515 0.051063425 0.051251171 0.051624671 0.052489283 0.052696940 0.052937480 0.053149303 0.054747115 0.054976627 0.056044663 0.056280625 0.056567741 0.056897909 0.057226781 0.059179234 0.060572358 0.061051319 0.061744505 0.062407733 0.063410735 0.064535723 0.065321732 0.065988522 0.066613133 0.068369729 0.069138205 0.070278858 0.072754667 0.074409109 0.074790386 0.076521487 0.078678955 0.084314735 0.086824052 0.087149873 0.087629140 0.089347738 0.090630381 0.091484376 0.094056602 0.094986704 0.095801686 0.096447872 0.097854520 0.098834772 0.099817477 0.100214124 0.100939531 0.102488583 0.103217725 0.103623615 0.104441137 0.104581343 0.106348511 0.107019922 0.108169783 0.109869916 0.111067940 0.112427112 0.113543445 0.115036167 0.116266032 0.116830492 0.118722156 0.121113858 0.122419787 0.123247340 0.124869397 0.126204348 0.126324463 0.126683978 0.127313256 0.132105729 0.135085463 0.135838649 0.142848995 0.143861855 0.147082340 0.147576790 0.149754882 0.152208832 0.154704119 0.155183868 0.156654765 0.161517457 0.161975635 0.173778686 0.174270693 0.181605030 0.184885683 0.186458666 0.189646020 0.190417926 0.194174756 0.195406133 0.198726486 0.200321721 0.205264809 0.207070729 0.207389396 0.210254272 0.216497588 0.217028720 0.217971297 0.219475723 0.220851306 0.225298610 0.226715520 0.232383366 0.235175542 0.235710364 0.236035661 0.244690569 0.256107872 0.257287881 0.263952380 0.269977530 0.280747173 0.283363660 0.286354332 0.291913675 0.297003623 0.304422758 0.305926300 0.307324666 0.314486046 0.316780214 0.317411950 0.322241399 0.330118116 0.332888522 0.351831847 0.352821610 0.355100531 0.355865325 0.360084655 0.363044628 0.364325381 0.384151004 0.386061403 0.392222519 0.410590939 0.425992649 0.431180332 0.462461887 0.469143877 0.478866615 0.484368663 0.484601417 0.487603944 0.491486407 0.509674250 0.515605367 0.535427135 0.569300107 0.575212648 0.591711713 0.594083648 0.607358416 0.608420057 0.644917077 0.647600380 0.649755179 0.674397172 0.678437412 0.686485699 0.692149531 0.693664488 0.700041171 0.704768154 0.718301907 0.742270959 0.751427313 0.759443951 0.771048391 0.773654577 0.779632209 0.811009456 0.816307618 0.819968848 0.822980143 0.823634584 0.831796991 0.835005017 0.837851327 0.842581568 0.845944159 0.847661457 0.850040812 0.859426254 0.865947517 0.868093424 0.874527372 0.886148900 0.886665664 0.889735216 0.900224758 0.901097707 0.904163513 0.923865350 0.928050039 0.936554677 0.937875168 0.966235424 0.976410610 0.986882006 1.001717179 1.020263559 1.028672966 1.042161479 1.051269502 1.057750022 1.068870340 1.086966831 1.088831395 1.104848882 1.108103747 1.112601174 1.127015853 1.135990043 1.140599839 1.144743282 1.176474521 1.179109014 1.181808640 1.187044955 1.191607256 1.198071415 1.224733924 1.228567437 1.274444130 1.302798842 1.321387155 1.328409842 1.333211220 1.336513871 1.338102392 1.342354806 1.343353735 1.345042165 1.359495646 1.379499346 1.383250973 1.385767771 1.410569226 1.420539928 1.431864962 1.551506395 1.685390346 1.776224588</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">281</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34296456" y3="0.05098175" z3="-0.19274013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39015286" y3="0.16518522" z3="0.41198287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.649606" y3="0.44036732" z3="-0.34513289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7278134" y3="1.23648795" z3="-2.26110447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38958758" y3="0.4350125" z3="-1.18319081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72764739" y3="0.84313353" z3="-3.65916332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63144923" y3="1.74716344" z3="-3.13262548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37557093" y3="2.5863182" z3="-4.60942006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55834971" y3="1.24529368" z3="-4.37024109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49516679" y3="2.92052462" z3="-5.16711516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92663425" y3="-0.48688707" z3="-3.4385831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09986663" y3="0.04442677" z3="-0.99909046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40296477" y3="-1.09984398" z3="-1.99807066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93135008" y3="-0.96911584" z3="-1.82533423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10521559" y3="-2.42409421" z3="-1.84272439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14414868" y3="-3.61838282" z3="0.6743948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00776057" y3="-5.255641" z3="-4.7417236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23846513" y3="-4.99771517" z3="-3.70465045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84101851" y3="-4.30719959" z3="-1.08675858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78419753" y3="-4.58801048" z3="-2.8513434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55491531" y3="-5.08848563" z3="-3.24904721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85700816" y3="-4.73779228" z3="-1.93563982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49499588" y3="-4.2575503" z3="-1.52591505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81843818" y3="-4.50877941" z3="-3.19665131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35201263" y3="-5.40354672" z3="-3.92555109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89479926" y3="-4.77527562" z3="-1.59371865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03286331" y3="-3.85932431" z3="0.23385823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17383762" y3="-3.64515401" z3="0.87741918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06216233" y3="-4.1057087" z3="0.44197448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1705397" y3="-3.51089218" z3="2.34449631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23173807" y3="-3.3271215" z3="5.14243102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36831996" y3="-3.71303597" z3="3.04604186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00331503" y3="-3.22312447" z3="3.06799307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03144467" y3="-3.13131559" z3="4.45655149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39791286" y3="-3.62355616" z3="4.43496662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28287414" y3="-3.95092793" z3="2.49643858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04280485" y3="-3.09177688" z3="2.56488797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10277239" y3="-2.92614911" z3="4.99612536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33669768" y3="-3.79339748" z3="4.96869706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25325703" y3="-3.26358185" z3="6.2339759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41353125" y3="-3.89235117" z3="-0.62057927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17466047" y3="-3.39062027" z3="-1.07246875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51985891" y3="0.23830995" z3="-4.70879722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07891014" y3="-1.716573" z3="0.02077131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90383555" y3="-0.96635596" z3="1.18272741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84140479" y3="-0.31773648" z3="1.51779218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36343807" y3="0.55136937" z3="1.22260527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4387987" y3="1.45599829" z3="-0.40108638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98506759" y3="-0.70862604" z3="1.39816898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34621056" y3="1.73884372" z3="2.67134195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88006776" y3="-0.95500873" z3="2.07921675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65169022" y3="-0.34224194" z3="3.33858191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20449377" y3="0.7670056" z3="-1.23065048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33956429" y3="2.24194913" z3="-0.39516071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41648941" y3="1.9451662" z3="-0.55903202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01236614" y3="-1.07615417" z3="2.43761263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95877928" y3="-0.24684852" z3="1.16189058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85907574" y3="-1.54799545" z3="0.69532374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40500264" y3="1.19588732" z3="3.63139906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5928375" y3="2.32192076" z3="2.67212076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18504476" y3="2.45615781" z3="2.62400278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79160722" y3="-0.80167516" z3="3.85208065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56806202" y3="-0.51380522" z3="3.91873939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47752162" y3="0.73961938" z3="3.21908564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84422667" y3="-0.70527967" z3="0.99079547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42219025" y3="-2.03377536" z3="0.85377359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76870568" y3="-2.67921335" z3="1.89630143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55428823" y3="-1.98329995" z3="3.08245857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02917148" y3="-0.6895992" z3="3.27628014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68255912" y3="-0.05758315" z3="2.22299225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53099476" y3="-2.53361108" z3="-0.11023262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37546908" y3="-3.68905833" z3="1.77417463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68963568" y3="-2.58193503" z3="4.1044821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84279039" y3="-0.17785313" z3="4.221308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02257593" y3="0.97546343" z3="2.33725598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79814663" y3="0.45864421" z3="-4.28726311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77736714" y3="-0.50911949" z3="-4.46605347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42810624" y3="-1.70120464" z3="-5.09060899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14079327" y3="-1.93233525" z3="-5.5654105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83152041" y3="-0.96114939" z3="-5.36286835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04433752" y3="1.38228332" z3="-3.75669932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79687422" y3="-0.36304568" z3="-4.10821024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43968816" y3="-2.75046783" z3="-5.2331603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09031778" y3="-2.87292193" z3="-6.06528781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85406105" y3="-1.14705359" z3="-5.6956207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35844016" y3="-1.8874903" z3="5.04554809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31198998" y3="-3.72281419" z3="3.93494318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21540295" y3="-3.65136045" z3="-6.01272383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44268328" y3="-2.66588628" z3="-4.5524327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07233305" y3="1.16252303" z3="-1.49441083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11029187" y3="1.5530186" z3="-2.47092109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44102419" y3="1.49097624" z3="-1.6946678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84935429" y3="2.15661766" z3="-2.82430133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16862482" y3="1.19226641" z3="-0.93364675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90591951" y3="2.39874818" z3="-2.97022095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56880934" y3="2.22367533" z3="-3.63906264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90020804" y3="2.51622046" z3="-3.8109961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84637529" y3="2.49730503" z3="-4.41150193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23025294" y3="3.02571891" z3="-4.72085008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3977763" y3="3.15054202" z3="-3.32889583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28045155" y3="3.56113925" z3="-4.11423254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20438619" y3="4.1627417" z3="-2.73587832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95032239" y3="5.49532064" z3="-2.95801758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03481143" y3="3.87508331" z3="-2.08916307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58663223" y3="6.25172791" z3="-2.49016988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05205499" y3="4.94686611" z3="-4.33806889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87128423" y3="5.89714728" z3="-3.78066271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19877927" y3="5.24328935" z3="-4.95603305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68428745" y3="6.96023064" z3="-3.95662086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47757961" y3="-2.19128895" z3="-0.3006501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44837797" y3="-2.98339827" z3="-1.0680678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00861307" y3="-2.57268308" z3="0.5864115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08967126" y3="-1.36991826" z3="-0.71907962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17339946" y3="-1.42131585" z3="-1.14843496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3103519" y3="-0.38205542" z3="-1.4979187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.096491" y3="-1.54728803" z3="-0.94277479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41283643" y3="-2.0766215" z3="-1.99932958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.343,.051,-.1927;7.3902,.1652,.412;6.6496,.4404,-.3451;4.7278,1.2365,-2.2611;4.3896,.435,-1.1832;2.7276,.8431,-3.6592;3.6314,1.7472,-3.1326;1.3756,2.5863,-4.6094;1.5583,1.2453,-4.3702;.4952,2.9205,-5.1671;2.9266,-.4869,-3.4386;3.0999,.0444,-.9991;2.403,-1.0998,-1.9981;.9314,-.9691,-1.8253;3.1052,-2.4241,-1.8427;-.1441,-3.6184,.6744;-.0078,-5.2556,-4.7417;-.2385,-4.9977,-3.7047;-.841,-4.3072,-1.0868;.7842,-4.588,-2.8513;-1.5549,-5.0885,-3.249;-1.857,-4.7378,-1.9356;.495,-4.2576,-1.5259;1.8184,-4.5088,-3.1967;-2.352,-5.4035,-3.9256;-2.8948,-4.7753,-1.5937;-1.0329,-3.8593,.2339;-2.1738,-3.6452,.8774;-3.0622,-4.1057,.442;-2.1705,-3.5109,2.3445;-2.2317,-3.3271,5.1424;-3.3683,-3.713,3.046;-1.0033,-3.2231,3.068;-1.0314,-3.1313,4.4566;-3.3979,-3.6236,4.435;-4.2829,-3.9509,2.4964;-.0428,-3.0918,2.5649;-.1028,-2.9261,4.9961;-4.3367,-3.7934,4.9687;-2.2533,-3.2636,6.234;1.4135,-3.8924,-.6206;2.1747,-3.3906,-1.0725;.5199,.2383,-4.7088;-3.0789,-1.7166,.0208;-2.9038,-.9664,1.1827;-1.8414,-.3177,1.5178;-.3634,.5514,1.2226;-.4388,1.456,-.4011;.9851,-.7086,1.3982;-.3462,1.7388,2.6713;-3.8801,-.955,2.0792;-3.6517,-.3422,3.3386;-.2045,.767,-1.2307;.3396,2.2419,-.3952;-1.4165,1.9452,-.559;1.0124,-1.0762,2.4376;1.9588,-.2468,1.1619;.8591,-1.548,.6953;-.405,1.1959,3.6314;.5928,2.3219,2.6721;-1.185,2.4562,2.624;-2.7916,-.8017,3.8521;-4.5681,-.5138,3.9187;-3.4775,.7396,3.2191;4.8442,-.7053,.9908;4.4222,-2.0338,.8538;3.7687,-2.6792,1.8963;3.5543,-1.9833,3.0825;4.0292,-.6896,3.2763;4.6826,-.0576,2.223;4.531,-2.5336,-.1102;3.3755,-3.6891,1.7742;2.6896,-2.5819,4.1045;3.8428,-.1779,4.2213;5.0226,.9755,2.3373;-.7981,.4586,-4.2873;-1.7774,-.5091,-4.4661;-1.4281,-1.7012,-5.0906;-.1408,-1.9323,-5.5654;.8315,-.9611,-5.3629;-1.0443,1.3823,-3.7567;-2.7969,-.363,-4.1082;-2.4397,-2.7505,-5.2332;.0903,-2.8729,-6.0653;1.8541,-1.1471,-5.6956;2.3584,-1.8875,5.0455;2.312,-3.7228,3.9349;-2.2154,-3.6514,-6.0127;-3.4427,-2.6659,-4.5524;7.0723,1.1625,-1.4944;6.1103,1.553,-2.4709;8.441,1.491,-1.6947;8.8494,2.1566,-2.8243;9.1686,1.1923,-.9336;9.9059,2.3987,-2.9702;6.5688,2.2237,-3.6391;7.9002,2.5162,-3.811;5.8464,2.4973,-4.4115;8.2303,3.0257,-4.7209;3.3978,3.1505,-3.3289;2.2805,3.5611,-4.1142;4.2044,4.1627,-2.7359;3.9503,5.4953,-2.958;5.0348,3.8751,-2.0892;4.5866,6.2517,-2.4902;2.0521,4.9469,-4.3381;2.8713,5.8971,-3.7807;1.1988,5.2433,-4.956;2.6843,6.9602,-3.9566;-4.4776,-2.1913,-.3007;-4.4484,-2.9834,-1.0681;-5.0086,-2.5727,.5864;-5.0897,-1.3699,-.7191;-2.1734,-1.4213,-1.1484;-2.3104,-.3821,-1.4979;-1.0965,-1.5473,-.9428;-2.4128,-2.0766,-1.9993;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421329092</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001268555609 0.000240605806 0.018939483980 0.005330108248</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030712655 -0.000486669 0.000152668 0.000171793 0.000226936 0.000353025 0.000412013 0.000584578 0.000714998 0.000862126 0.001015769 0.001139791 0.001228421 0.001349549 0.001431997 0.001481153 0.001551886 0.001701626 0.001817298 0.001887912 0.002151055 0.002346167 0.002439160 0.002574927 0.002676086 0.003014410 0.003116764 0.003362599 0.003527236 0.003908671 0.004459911 0.004690610 0.004763398 0.005079625 0.006043986 0.006102271 0.006320159 0.006654773 0.006991099 0.007724692 0.008128215 0.008169884 0.008359868 0.009374871 0.009953096 0.010147904 0.010591219 0.011153704 0.011951171 0.012150952 0.012980430 0.013133674 0.014174170 0.014674065 0.015364677 0.015543913 0.015936105 0.016569216 0.016784029 0.017519340 0.018166309 0.018663711 0.019415893 0.019621133 0.020173158 0.020712271 0.021261461 0.021452910 0.022396303 0.023128804 0.024052086 0.026398794 0.026852731 0.027808797 0.027932960 0.029558306 0.030349475 0.031605632 0.033290610 0.033659964 0.034133138 0.035797728 0.037146032 0.037483612 0.039526022 0.040036984 0.040538945 0.040988638 0.042568950 0.044683209 0.045524958 0.047120016 0.048021615 0.049274732 0.050500469 0.051068761 0.051259480 0.051626151 0.052489295 0.052697535 0.052940625 0.053167491 0.054754045 0.054977531 0.056045999 0.056285076 0.056570143 0.056912374 0.057227153 0.059187273 0.060571722 0.061051117 0.061754771 0.062409428 0.063413904 0.064535896 0.065321807 0.065991156 0.066613747 0.068379987 0.069141085 0.070279168 0.072755630 0.074412117 0.074792200 0.076520627 0.078685918 0.084320994 0.086824633 0.087150917 0.087627686 0.089353407 0.090638594 0.091484963 0.094062459 0.094987478 0.095803610 0.096449728 0.097856150 0.098835221 0.099940791 0.100214179 0.100941167 0.102491037 0.103217940 0.103630136 0.104440965 0.104586030 0.106347730 0.107021655 0.108172106 0.109879743 0.111078042 0.112431092 0.113541442 0.115038891 0.116268012 0.116830290 0.118727883 0.121155740 0.122428709 0.123283343 0.124924651 0.126209319 0.126326955 0.126687011 0.127329923 0.132110026 0.135091654 0.135841636 0.142848859 0.143870219 0.147082192 0.147582523 0.149753739 0.152211664 0.154705084 0.155183236 0.156652341 0.161519443 0.161983675 0.173778404 0.174279455 0.181608219 0.184905891 0.186459017 0.189646037 0.190420972 0.194176043 0.195418344 0.198728327 0.200325340 0.205259280 0.207071458 0.207391469 0.210254495 0.216508845 0.217040142 0.217966580 0.219539395 0.220851433 0.225304202 0.226717428 0.232384889 0.235179217 0.235710555 0.236045964 0.244690522 0.256113067 0.257288296 0.263957557 0.269979182 0.280749847 0.283378620 0.286356587 0.291914690 0.297010169 0.304422886 0.305939871 0.307323250 0.314486591 0.316783464 0.317412992 0.322242095 0.330121499 0.332888765 0.351830708 0.352824826 0.355102579 0.355868871 0.360095779 0.363044383 0.364351867 0.384151337 0.386057486 0.392237340 0.410591538 0.425993157 0.431190629 0.462462292 0.469148522 0.478896987 0.484369599 0.484599715 0.487610078 0.491485259 0.509674825 0.515605712 0.535427226 0.569302003 0.575217804 0.591709129 0.594084563 0.607358449 0.608424368 0.644925481 0.647604136 0.649759122 0.674394740 0.678439960 0.686543212 0.692192053 0.693663587 0.700038942 0.704771292 0.718308204 0.742271539 0.751429076 0.759444890 0.771160349 0.773737804 0.779632378 0.811009079 0.816355884 0.819976048 0.822982358 0.823648617 0.831831633 0.835012208 0.837852215 0.842585736 0.845944619 0.847660685 0.850061140 0.859443148 0.865947476 0.868214753 0.874528445 0.886151199 0.886788423 0.889747424 0.900254236 0.901096769 0.904164514 0.923874201 0.928050991 0.936561413 0.937877939 0.966247079 0.976410575 0.986908377 1.001717145 1.020263286 1.028673104 1.042195394 1.051367182 1.057800059 1.068873654 1.086969534 1.088833035 1.104854568 1.108105440 1.112604547 1.127134273 1.135994686 1.140671829 1.144774731 1.176476881 1.179113492 1.181808319 1.187055904 1.191607436 1.198084340 1.224734985 1.228622046 1.274456812 1.302802248 1.321386214 1.328410353 1.333213448 1.336514686 1.338102336 1.342358198 1.343369236 1.345042539 1.359536231 1.379525489 1.383261612 1.385765922 1.410576413 1.420543253 1.431869226 1.551508614 1.685411866 1.776251945</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">282</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34172783" y3="0.04601773" z3="-0.19198007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38803954" y3="0.16882016" z3="0.41715171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64757201" y3="0.44169118" z3="-0.34113872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72596767" y3="1.23366181" z3="-2.25914676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38852653" y3="0.42894688" z3="-1.18311913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72687329" y3="0.8398489" z3="-3.65914651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62927009" y3="1.74422879" z3="-3.13033397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37411219" y3="2.58268356" z3="-4.60872641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55762926" y3="1.24158759" z3="-4.37072406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4941288" y3="2.91639142" z3="-5.16739114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92694426" y3="-0.49022473" z3="-3.44076523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0994827" y3="0.03601414" z3="-1.00035648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40362686" y3="-1.10677009" z3="-2.00169988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93193353" y3="-0.97776845" z3="-1.82853739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10671011" y3="-2.43092824" z3="-1.84904821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14394788" y3="-3.60846048" z3="0.66996845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01349981" y3="-5.26273828" z3="-4.74218781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24228447" y3="-5.00260762" z3="-3.70508759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8414934" y3="-4.30546054" z3="-1.08734898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78265502" y3="-4.59527847" z3="-2.85275723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55927674" y3="-5.08779748" z3="-3.24824009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8598268" y3="-4.7337623" z3="-1.93525462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49498745" y3="-4.26162468" z3="-1.52764515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81526665" y3="-4.51597377" z3="-3.19826499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35844939" y3="-5.40110057" z3="-3.92378276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89621214" y3="-4.77066887" z3="-1.59333099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03131102" y3="-3.85451861" z3="0.2325895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17155792" y3="-3.64171992" z3="0.87720997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05882321" y3="-4.10367205" z3="0.44276711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16715707" y3="-3.50674151" z3="2.34415673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22621919" y3="-3.323088" z3="5.14203152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36409864" y3="-3.70876381" z3="3.04670592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99964217" y3="-3.21916905" z3="3.0666873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02619724" y3="-3.12823157" z3="4.45532736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3928349" y3="-3.6189186" z3="4.43553946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27998222" y3="-3.94515038" z3="2.49766533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03937873" y3="-3.08836369" z3="2.56302016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0959035" y3="-2.92580844" z3="4.99457406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33227789" y3="-3.78654211" z3="4.97007967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24674979" y3="-3.25989758" z3="6.23357112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41528261" y3="-3.89733319" z3="-0.6235952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17552511" y3="-3.39667917" z3="-1.07664368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51934456" y3="0.23493374" z3="-4.70950638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07921342" y3="-1.71319113" z3="0.01972989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9006471" y3="-0.96242149" z3="1.18086704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83782631" y3="-0.31350744" z3="1.5129192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3607686" y3="0.55646688" z3="1.21598152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43416465" y3="1.45354922" z3="-0.41196041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98817063" y3="-0.70233398" z3="1.39863307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34738366" y3="1.75182699" z3="2.65850962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87437685" y3="-0.9506299" z3="2.08010062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64325743" y3="-0.33693376" z3="3.33800353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20105803" y3="0.76078337" z3="-1.23856489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34578817" y3="2.23780282" z3="-0.40959699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41062072" y3="1.9438784" z3="-0.57211816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0148267" y3="-1.0650098" z3="2.43928158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96228817" y3="-0.24215994" z3="1.16070491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8624124" y3="-1.54506958" z3="0.69940975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40711402" y3="1.2148268" z3="3.62180686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59041235" y3="2.33673429" z3="2.65732923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1874067" y3="2.46701411" z3="2.60553231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.783059" y3="-0.79596584" z3="3.85059601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55861819" y3="-0.50717756" z3="3.92020832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46834107" y3="0.7446871" z3="3.21719339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84402096" y3="-0.71269265" z3="0.99039604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41832812" y3="-2.03969027" z3="0.85065277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76542356" y3="-2.68637825" z3="1.89266975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55588854" y3="-1.99338138" z3="3.08139291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03507997" y3="-0.70161741" z3="3.27812784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68699091" y3="-0.0682056" z3="2.22474121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52372344" y3="-2.537205" z3="-0.1149191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36834511" y3="-3.69478038" z3="1.76772771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69310709" y3="-2.59302436" z3="4.10434686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85232434" y3="-0.19209462" z3="4.2247352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02945561" y3="0.96368557" z3="2.34088429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79919307" y3="0.45632393" z3="-4.28909912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77882811" y3="-0.5114141" z3="-4.46998957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42935225" y3="-1.70420702" z3="-5.09148413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14108704" y3="-1.93620295" z3="-5.56370155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83119348" y3="-0.96551128" z3="-5.36310437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04541718" y3="1.38060761" z3="-3.76051817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79867336" y3="-0.36440348" z3="-4.11322013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44133711" y3="-2.75279849" z3="-5.23393218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09084065" y3="-2.8776728" z3="-6.06225958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85403484" y3="-1.15246369" z3="-5.69411959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36540411" y3="-1.90020013" z3="5.04796486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31411283" y3="-3.73294463" z3="3.93380583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21605113" y3="-3.655044" z3="-6.01201762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44559842" y3="-2.666378" z3="-4.55544253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06973989" y3="1.16639195" z3="-1.48878618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10788453" y3="1.55430333" z3="-2.46663171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43762547" y3="1.49991882" z3="-1.68590943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84584439" y3="2.169549" z3="-2.81347754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16465433" y3="1.20208735" z3="-0.9240888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90158459" y3="2.41492192" z3="-2.95710655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56620622" y3="2.22759101" z3="-3.63308952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89727274" y3="2.52707472" z3="-3.80148823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8441858" y3="2.49915097" z3="-4.40671046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22725622" y3="3.03870156" z3="-4.70991606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39402649" y3="3.14769848" z3="-3.32454996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27726055" y3="3.55819999" z3="-4.11072384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19860047" y3="4.15994179" z3="-2.72894193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94344707" y3="5.49252539" z3="-2.94967601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02826741" y3="3.87245924" z3="-2.0812099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57767555" y3="6.24948214" z3="-2.47903557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04780468" y3="4.94395547" z3="-4.3331709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8654109" y3="5.89418427" z3="-3.77366115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19538047" y3="5.23999811" z3="-4.95240506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67785698" y3="6.95716761" z3="-3.9488249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47868816" y3="-2.18822602" z3="-0.29752011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45139071" y3="-2.98106765" z3="-1.06420889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00734907" y3="-2.56887627" z3="0.59110228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09203075" y3="-1.36733995" z3="-0.71524919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17553451" y3="-1.42010872" z3="-1.15120023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3106861" y3="-0.37881355" z3="-1.50022888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0999984" y3="-1.54523144" z3="-0.94514307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41690423" y3="-2.07551289" z3="-2.00167743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3417,.046,-.192;7.388,.1688,.4172;6.6476,.4417,-.3411;4.726,1.2337,-2.2591;4.3885,.4289,-1.1831;2.7269,.8398,-3.6591;3.6293,1.7442,-3.1303;1.3741,2.5827,-4.6087;1.5576,1.2416,-4.3707;.4941,2.9164,-5.1674;2.9269,-.4902,-3.4408;3.0995,.036,-1.0004;2.4036,-1.1068,-2.0017;.9319,-.9778,-1.8285;3.1067,-2.4309,-1.849;-.1439,-3.6085,.67;-.0135,-5.2627,-4.7422;-.2423,-5.0026,-3.7051;-.8415,-4.3055,-1.0873;.7827,-4.5953,-2.8528;-1.5593,-5.0878,-3.2482;-1.8598,-4.7338,-1.9353;.495,-4.2616,-1.5276;1.8153,-4.516,-3.1983;-2.3584,-5.4011,-3.9238;-2.8962,-4.7707,-1.5933;-1.0313,-3.8545,.2326;-2.1716,-3.6417,.8772;-3.0588,-4.1037,.4428;-2.1672,-3.5067,2.3442;-2.2262,-3.3231,5.142;-3.3641,-3.7088,3.0467;-.9996,-3.2192,3.0667;-1.0262,-3.1282,4.4553;-3.3928,-3.6189,4.4355;-4.28,-3.9452,2.4977;-.0394,-3.0884,2.563;-.0959,-2.9258,4.9946;-4.3323,-3.7865,4.9701;-2.2467,-3.2599,6.2336;1.4153,-3.8973,-.6236;2.1755,-3.3967,-1.0766;.5193,.2349,-4.7095;-3.0792,-1.7132,.0197;-2.9006,-.9624,1.1809;-1.8378,-.3135,1.5129;-.3608,.5565,1.216;-.4342,1.4535,-.412;.9882,-.7023,1.3986;-.3474,1.7518,2.6585;-3.8744,-.9506,2.0801;-3.6433,-.3369,3.338;-.2011,.7608,-1.2386;.3458,2.2378,-.4096;-1.4106,1.9439,-.5721;1.0148,-1.065,2.4393;1.9623,-.2422,1.1607;.8624,-1.5451,.6994;-.4071,1.2148,3.6218;.5904,2.3367,2.6573;-1.1874,2.467,2.6055;-2.7831,-.796,3.8506;-4.5586,-.5072,3.9202;-3.4683,.7447,3.2172;4.844,-.7127,.9904;4.4183,-2.0397,.8507;3.7654,-2.6864,1.8927;3.5559,-1.9934,3.0814;4.0351,-.7016,3.2781;4.687,-.0682,2.2247;4.5237,-2.5372,-.1149;3.3683,-3.6948,1.7677;2.6931,-2.593,4.1043;3.8523,-.1921,4.2247;5.0295,.9637,2.3409;-.7992,.4563,-4.2891;-1.7788,-.5114,-4.47;-1.4294,-1.7042,-5.0915;-.1411,-1.9362,-5.5637;.8312,-.9655,-5.3631;-1.0454,1.3806,-3.7605;-2.7987,-.3644,-4.1132;-2.4413,-2.7528,-5.2339;.0908,-2.8777,-6.0623;1.854,-1.1525,-5.6941;2.3654,-1.9002,5.048;2.3141,-3.7329,3.9338;-2.2161,-3.655,-6.012;-3.4456,-2.6664,-4.5554;7.0697,1.1664,-1.4888;6.1079,1.5543,-2.4666;8.4376,1.4999,-1.6859;8.8458,2.1695,-2.8135;9.1647,1.2021,-.9241;9.9016,2.4149,-2.9571;6.5662,2.2276,-3.6331;7.8973,2.5271,-3.8015;5.8442,2.4992,-4.4067;8.2273,3.0387,-4.7099;3.394,3.1477,-3.3245;2.2773,3.5582,-4.1107;4.1986,4.1599,-2.7289;3.9434,5.4925,-2.9497;5.0283,3.8725,-2.0812;4.5777,6.2495,-2.479;2.0478,4.944,-4.3332;2.8654,5.8942,-3.7737;1.1954,5.24,-4.9524;2.6779,6.9572,-3.9488;-4.4787,-2.1882,-.2975;-4.4514,-2.9811,-1.0642;-5.0073,-2.5689,.5911;-5.092,-1.3673,-.7152;-2.1755,-1.4201,-1.1512;-2.3107,-.3788,-1.5002;-1.1,-1.5452,-.9451;-2.4169,-2.0755,-2.0017;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420985374</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001323861440 0.000261738178 0.015847797554 0.005329200473</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030714676 -0.000391013 0.000113690 0.000180604 0.000242579 0.000353319 0.000398215 0.000584766 0.000702318 0.000858618 0.001016014 0.001109717 0.001228158 0.001343752 0.001418641 0.001477783 0.001535552 0.001707589 0.001818540 0.001889360 0.002146645 0.002349555 0.002444353 0.002575837 0.002676385 0.003022827 0.003110777 0.003352234 0.003523725 0.003908558 0.004461532 0.004691710 0.004762953 0.005080396 0.006037586 0.006106242 0.006319760 0.006654703 0.006990573 0.007726425 0.008133451 0.008177084 0.008365543 0.009376814 0.009956611 0.010149817 0.010589693 0.011154651 0.011954694 0.012152506 0.012997285 0.013129247 0.014180193 0.014701827 0.015370634 0.015561580 0.015937808 0.016575147 0.016779197 0.017515657 0.018166939 0.018671480 0.019416581 0.019622141 0.020182863 0.020712824 0.021263453 0.021454853 0.022395273 0.023128965 0.024049700 0.026398647 0.026855885 0.027809685 0.027973604 0.029558212 0.030358065 0.031608281 0.033290513 0.033660198 0.034133993 0.035797828 0.037154116 0.037481756 0.039526713 0.040037273 0.040547300 0.040988121 0.042570090 0.044685064 0.045529049 0.047119448 0.048021613 0.049275860 0.050502068 0.051072381 0.051267848 0.051628376 0.052489267 0.052697870 0.052944148 0.053180464 0.054764405 0.054977924 0.056049089 0.056291312 0.056571917 0.056923358 0.057227237 0.059192583 0.060572435 0.061052871 0.061765682 0.062410371 0.063414479 0.064535937 0.065321951 0.065996361 0.066617831 0.068383678 0.069143012 0.070279682 0.072756052 0.074415282 0.074794460 0.076521339 0.078691951 0.084325330 0.086824807 0.087150345 0.087627822 0.089359685 0.090646215 0.091486823 0.094072558 0.094987210 0.095804122 0.096453187 0.097856078 0.098835322 0.100075546 0.100215129 0.100945986 0.102496067 0.103218595 0.103644319 0.104445452 0.104594244 0.106346219 0.107020730 0.108173157 0.109892866 0.111087014 0.112432613 0.113541331 0.115042650 0.116269744 0.116830881 0.118730518 0.121191642 0.122434738 0.123331467 0.124966800 0.126213368 0.126329647 0.126687250 0.127359794 0.132112501 0.135098837 0.135844889 0.142848434 0.143873708 0.147082438 0.147585450 0.149752742 0.152210151 0.154704599 0.155181544 0.156650751 0.161517346 0.161986981 0.173778618 0.174291349 0.181608107 0.184931121 0.186459795 0.189645864 0.190423519 0.194177771 0.195433825 0.198728146 0.200329320 0.205256452 0.207070813 0.207394716 0.210254713 0.216518544 0.217048969 0.217964860 0.219614958 0.220852990 0.225312141 0.226719715 0.232385698 0.235180601 0.235711105 0.236055929 0.244691063 0.256119797 0.257289151 0.263964126 0.269979746 0.280754323 0.283397173 0.286357620 0.291918315 0.297015015 0.304423051 0.305952639 0.307323362 0.314487399 0.316784570 0.317413082 0.322242349 0.330130150 0.332888648 0.351830543 0.352827073 0.355106317 0.355871899 0.360101317 0.363044080 0.364384159 0.384151591 0.386056875 0.392246105 0.410590686 0.425993534 0.431196751 0.462462305 0.469154555 0.478931959 0.484373376 0.484599295 0.487615048 0.491484031 0.509675143 0.515605749 0.535427638 0.569303410 0.575228067 0.591710217 0.594085064 0.607360427 0.608431498 0.644925748 0.647614064 0.649761593 0.674396430 0.678443775 0.686596335 0.692240491 0.693663351 0.700042005 0.704774389 0.718317769 0.742271995 0.751430825 0.759445737 0.771266421 0.773822871 0.779632701 0.811009319 0.816394437 0.819986326 0.822985475 0.823666272 0.831868719 0.835015721 0.837855524 0.842588339 0.845945189 0.847662467 0.850095593 0.859461742 0.865948319 0.868311074 0.874528451 0.886157028 0.886932657 0.889758244 0.900311484 0.901097380 0.904164482 0.923888547 0.928054953 0.936566733 0.937878257 0.966262327 0.976411708 0.986937421 1.001717924 1.020262533 1.028674003 1.042238803 1.051467131 1.057858620 1.068878549 1.086974211 1.088837745 1.104868763 1.108105996 1.112612065 1.127272945 1.136003259 1.140759127 1.144811425 1.176480595 1.179117636 1.181809722 1.187078495 1.191607786 1.198094011 1.224738920 1.228679238 1.274460825 1.302804088 1.321389816 1.328413028 1.333220676 1.336527873 1.338106295 1.342361260 1.343402878 1.345042593 1.359565296 1.379534769 1.383273588 1.385766188 1.410576903 1.420550369 1.431870623 1.551510153 1.685430676 1.776260286</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">283</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34007447" y3="0.04317259" z3="-0.19157914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38469606" y3="0.1668546" z3="0.41942442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64478789" y3="0.44014809" z3="-0.33905424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72399975" y3="1.23295097" z3="-2.25730326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38709725" y3="0.42594924" z3="-1.18311015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72669296" y3="0.83877939" z3="-3.6599136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62732175" y3="1.74323459" z3="-3.12868483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37198317" y3="2.58177834" z3="-4.60669899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55732558" y3="1.24041502" z3="-4.3712061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49189711" y3="2.91579286" z3="-5.16493443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9287245" y3="-0.49150868" z3="-3.44402588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09853237" y3="0.03011662" z3="-1.00246804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40426457" y3="-1.11119219" z3="-2.00677351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93234693" y3="-0.98307821" z3="-1.83464291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10746879" y3="-2.43545789" z3="-1.85593958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14103225" y3="-3.61131706" z3="0.67114616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01951343" y3="-5.26936758" z3="-4.73955483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24724345" y3="-5.00765489" z3="-3.70274865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84264629" y3="-4.30658883" z3="-1.08580887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77821106" y3="-4.59828487" z3="-2.8527036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56295946" y3="-5.09313131" z3="-3.24416811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86139581" y3="-4.73718879" z3="-1.93130073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49262078" y3="-4.26267635" z3="-1.52776237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81207593" y3="-4.52345423" z3="-3.20028945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36264918" y3="-5.40751839" z3="-3.91816733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89866129" y3="-4.77026801" z3="-1.58728088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03105358" y3="-3.85346493" z3="0.23361198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17052828" y3="-3.63813698" z3="0.87931593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05956322" y3="-4.0996216" z3="0.44648351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16492948" y3="-3.5011228" z3="2.34613807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22277396" y3="-3.31328089" z3="5.14383386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36254391" y3="-3.69895351" z3="3.0493116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99599202" y3="-3.21598197" z3="3.0679705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02251791" y3="-3.12232648" z3="4.4564146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39047125" y3="-3.60738978" z3="4.4380906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27836907" y3="-3.93517946" z3="2.50105489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03517237" y3="-3.08937325" z3="2.56365604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09281548" y3="-2.91995108" z3="4.99507088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.329075" y3="-3.77399657" z3="4.97300419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24289828" y3="-3.24823254" z3="6.23528625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41445863" y3="-3.89778161" z3="-0.62547264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17552834" y3="-3.39987066" z3="-1.08066897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52024476" y3="0.23267169" z3="-4.71212946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07785877" y3="-1.71137683" z3="0.02004403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89829655" y3="-0.95782049" z3="1.17900716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83455753" y3="-0.30839665" z3="1.50780509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35635458" y3="0.55867953" z3="1.20789735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.42852906" y3="1.45183986" z3="-0.42217145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99031628" y3="-0.7016879" z3="1.39554657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34124027" y3="1.7585645" z3="2.64654755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87105644" y3="-0.94327441" z3="2.07925894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63704809" y3="-0.32746831" z3="3.33610998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19867611" y3="0.75626449" z3="-1.24747964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35415459" y3="2.23365722" z3="-0.42233719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40376906" y3="1.94514089" z3="-0.58233988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01348243" y3="-1.06394134" z3="2.43712294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96578042" y3="-0.24324708" z3="1.15946589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86503939" y3="-1.54496051" z3="0.69735561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40112776" y3="1.22511385" z3="3.61170468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59742764" y3="2.34221916" z3="2.64277189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18023368" y3="2.47498657" z3="2.59145935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77562957" y3="-0.78652415" z3="3.84754596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55139958" y3="-0.49623491" z3="3.92049735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46199484" y3="0.75379896" z3="3.21308002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84301784" y3="-0.71867722" z3="0.98900162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41478603" y3="-2.04460806" z3="0.84544129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76245686" y3="-2.69370825" z3="1.88636636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55541348" y3="-2.00413701" z3="3.07736272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03703155" y3="-0.71384089" z3="3.27757105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68924924" y3="-0.07804315" z3="2.22590497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51725239" y3="-2.53889493" z3="-0.12250164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36442847" y3="-3.70112273" z3="1.75938552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69352553" y3="-2.60574074" z3="4.09989266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85654234" y3="-0.20723688" z3="4.22629695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03450394" y3="0.95283399" z3="2.34556835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79864382" y3="0.45336278" z3="-4.29363505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77725298" y3="-0.51493775" z3="-4.47281044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42650094" y3="-1.70798835" z3="-5.09418775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13840602" y3="-1.93945133" z3="-5.56686481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83328486" y3="-0.96760918" z3="-5.36454587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.046062" y3="1.3777003" z3="-3.76494627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7974342" y3="-0.36851754" z3="-4.11700811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43758924" y3="-2.75778052" z3="-5.23625217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09395939" y3="-2.88087507" z3="-6.06467117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85628618" y3="-1.15398" z3="-5.69539686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37086855" y3="-1.91604793" z3="5.0476946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31010029" y3="-3.74385864" z3="3.92494467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21113517" y3="-3.66125812" z3="-6.01227788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44248921" y3="-2.67083083" z3="-4.55873617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06676701" y3="1.16889716" z3="-1.48441674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10544686" y3="1.55730268" z3="-2.46241786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4340856" y3="1.50693252" z3="-1.67883557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84188389" y3="2.17935077" z3="-2.80460236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1609846" y3="1.21020348" z3="-0.91636691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89732679" y3="2.42901206" z3="-2.94595723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56367429" y3="2.23495098" z3="-3.62672374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89368528" y3="2.53622317" z3="-3.7932236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8420391" y3="2.50686726" z3="-4.4005185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22347268" y3="3.05091059" z3="-4.70014524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38989514" y3="3.14668583" z3="-3.31997729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27346353" y3="3.55699744" z3="-4.106694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19151546" y3="4.15919911" z3="-2.72042108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93414784" y3="5.49182871" z3="-2.9381923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02065223" y3="3.87174893" z3="-2.07202688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56674732" y3="6.24827826" z3="-2.46541623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04170885" y3="4.94292694" z3="-4.32606006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85658722" y3="5.89350697" z3="-3.76278498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18934881" y3="5.2391554" z3="-4.94535161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66702707" y3="6.95669574" z3="-3.93531538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47795219" y3="-2.18624705" z3="-0.29491938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45238706" y3="-2.98173011" z3="-1.05926421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00635516" y3="-2.56356079" z3="0.59539695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09087119" y3="-1.36597413" z3="-0.71454076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17620493" y3="-1.41981511" z3="-1.15295119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31326301" y3="-0.38099488" z3="-1.50427488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09875215" y3="-1.54648785" z3="-0.95029102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41918045" y3="-2.07679461" z3="-2.00165888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3401,.0432,-.1916;7.3847,.1669,.4194;6.6448,.4401,-.3391;4.724,1.233,-2.2573;4.3871,.4259,-1.1831;2.7267,.8388,-3.6599;3.6273,1.7432,-3.1287;1.372,2.5818,-4.6067;1.5573,1.2404,-4.3712;.4919,2.9158,-5.1649;2.9287,-.4915,-3.444;3.0985,.0301,-1.0025;2.4043,-1.1112,-2.0068;.9323,-.9831,-1.8346;3.1075,-2.4355,-1.8559;-.141,-3.6113,.6711;-.0195,-5.2694,-4.7396;-.2472,-5.0077,-3.7027;-.8426,-4.3066,-1.0858;.7782,-4.5983,-2.8527;-1.563,-5.0931,-3.2442;-1.8614,-4.7372,-1.9313;.4926,-4.2627,-1.5278;1.8121,-4.5235,-3.2003;-2.3626,-5.4075,-3.9182;-2.8987,-4.7703,-1.5873;-1.0311,-3.8535,.2336;-2.1705,-3.6381,.8793;-3.0596,-4.0996,.4465;-2.1649,-3.5011,2.3461;-2.2228,-3.3133,5.1438;-3.3625,-3.699,3.0493;-.996,-3.216,3.068;-1.0225,-3.1223,4.4564;-3.3905,-3.6074,4.4381;-4.2784,-3.9352,2.5011;-.0352,-3.0894,2.5637;-.0928,-2.92,4.9951;-4.3291,-3.774,4.973;-2.2429,-3.2482,6.2353;1.4145,-3.8978,-.6255;2.1755,-3.3999,-1.0807;.5202,.2327,-4.7121;-3.0779,-1.7114,.02;-2.8983,-.9578,1.179;-1.8346,-.3084,1.5078;-.3564,.5587,1.2079;-.4285,1.4518,-.4222;.9903,-.7017,1.3955;-.3412,1.7586,2.6465;-3.8711,-.9433,2.0793;-3.637,-.3275,3.3361;-.1987,.7563,-1.2475;.3542,2.2337,-.4223;-1.4038,1.9451,-.5823;1.0135,-1.0639,2.4371;1.9658,-.2432,1.1595;.865,-1.545,.6974;-.4011,1.2251,3.6117;.5974,2.3422,2.6428;-1.1802,2.475,2.5915;-2.7756,-.7865,3.8475;-4.5514,-.4962,3.9205;-3.462,.7538,3.2131;4.843,-.7187,.989;4.4148,-2.0446,.8454;3.7625,-2.6937,1.8864;3.5554,-2.0041,3.0774;4.037,-.7138,3.2776;4.6892,-.078,2.2259;4.5173,-2.5389,-.1225;3.3644,-3.7011,1.7594;2.6935,-2.6057,4.0999;3.8565,-.2072,4.2263;5.0345,.9528,2.3456;-.7986,.4534,-4.2936;-1.7773,-.5149,-4.4728;-1.4265,-1.708,-5.0942;-.1384,-1.9395,-5.5669;.8333,-.9676,-5.3645;-1.0461,1.3777,-3.7649;-2.7974,-.3685,-4.117;-2.4376,-2.7578,-5.2363;.094,-2.8809,-6.0647;1.8563,-1.154,-5.6954;2.3709,-1.916,5.0477;2.3101,-3.7439,3.9249;-2.2111,-3.6613,-6.0123;-3.4425,-2.6708,-4.5587;7.0668,1.1689,-1.4844;6.1054,1.5573,-2.4624;8.4341,1.5069,-1.6788;8.8419,2.1794,-2.8046;9.161,1.2102,-.9164;9.8973,2.429,-2.946;6.5637,2.235,-3.6267;7.8937,2.5362,-3.7932;5.842,2.5069,-4.4005;8.2235,3.0509,-4.7001;3.3899,3.1467,-3.32;2.2735,3.557,-4.1067;4.1915,4.1592,-2.7204;3.9341,5.4918,-2.9382;5.0207,3.8717,-2.072;4.5667,6.2483,-2.4654;2.0417,4.9429,-4.3261;2.8566,5.8935,-3.7628;1.1893,5.2392,-4.9454;2.667,6.9567,-3.9353;-4.478,-2.1862,-.2949;-4.4524,-2.9817,-1.0593;-5.0064,-2.5636,.5954;-5.0909,-1.366,-.7145;-2.1762,-1.4198,-1.153;-2.3133,-.381,-1.5043;-1.0988,-1.5465,-.9503;-2.4192,-2.0768,-2.0017;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418581859</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001159287040 0.000251274225 0.015949847671 0.005320234621</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030714847 -0.000301683 0.000113936 0.000180279 0.000227218 0.000353046 0.000404057 0.000584429 0.000702409 0.000859414 0.001017162 0.001108963 0.001228266 0.001344581 0.001418827 0.001478044 0.001536009 0.001707543 0.001818933 0.001890404 0.002146370 0.002349492 0.002444480 0.002576177 0.002678197 0.003022561 0.003110394 0.003351910 0.003523594 0.003908920 0.004462499 0.004691700 0.004763693 0.005083030 0.006038700 0.006107347 0.006319758 0.006654534 0.006992479 0.007727384 0.008133924 0.008180050 0.008366594 0.009382369 0.009957284 0.010151047 0.010589854 0.011158602 0.011956675 0.012154442 0.013010687 0.013130020 0.014186424 0.014719035 0.015372644 0.015580525 0.015941888 0.016588870 0.016778879 0.017516812 0.018170281 0.018683776 0.019417872 0.019622717 0.020191042 0.020712905 0.021265700 0.021457326 0.022395073 0.023128959 0.024051755 0.026399088 0.026858912 0.027809666 0.028005288 0.029558210 0.030365590 0.031609416 0.033291047 0.033660262 0.034135754 0.035798334 0.037157195 0.037481787 0.039526934 0.040039711 0.040547704 0.040988072 0.042570319 0.044686613 0.045534148 0.047120245 0.048021621 0.049276435 0.050502228 0.051074239 0.051275095 0.051631078 0.052489254 0.052698081 0.052946417 0.053190172 0.054773521 0.054978226 0.056051561 0.056298267 0.056572711 0.056930337 0.057227211 0.059195522 0.060572260 0.061053406 0.061774692 0.062411057 0.063414860 0.064535900 0.065321864 0.066000035 0.066620701 0.068388549 0.069142644 0.070279914 0.072756307 0.074416938 0.074796633 0.076521191 0.078693692 0.084329739 0.086825877 0.087150346 0.087630036 0.089368817 0.090650265 0.091486690 0.094084673 0.094987468 0.095806004 0.096456630 0.097856078 0.098835122 0.100174956 0.100224876 0.100951356 0.102503910 0.103219598 0.103660868 0.104451140 0.104602981 0.106347612 0.107021364 0.108173573 0.109907115 0.111095815 0.112434548 0.113542018 0.115045975 0.116270772 0.116832482 0.118733609 0.121216807 0.122439653 0.123377979 0.124996964 0.126216256 0.126330478 0.126687836 0.127383646 0.132114038 0.135101460 0.135846838 0.142848317 0.143877706 0.147082853 0.147586386 0.149753742 0.152210348 0.154704636 0.155181369 0.156651570 0.161517592 0.161988038 0.173779290 0.174298782 0.181616654 0.184959931 0.186459901 0.189646032 0.190426948 0.194179385 0.195447206 0.198728858 0.200332700 0.205256291 0.207071302 0.207398536 0.210255998 0.216523156 0.217052753 0.217965001 0.219667655 0.220853969 0.225321745 0.226721635 0.232385686 0.235180783 0.235711902 0.236062104 0.244691788 0.256123092 0.257290908 0.263969798 0.269979690 0.280755599 0.283413228 0.286357859 0.291922885 0.297019484 0.304424438 0.305959145 0.307323617 0.314487633 0.316784559 0.317413236 0.322242385 0.330137239 0.332889246 0.351831510 0.352827076 0.355106869 0.355878891 0.360102963 0.363044040 0.364413961 0.384153131 0.386056808 0.392251119 0.410591518 0.425995143 0.431204826 0.462462385 0.469161056 0.478952217 0.484373517 0.484600915 0.487617545 0.491484668 0.509675124 0.515606489 0.535427733 0.569303521 0.575234213 0.591710563 0.594085194 0.607361498 0.608437515 0.644927479 0.647634363 0.649762132 0.674403331 0.678446012 0.686635615 0.692282581 0.693664665 0.700052604 0.704776600 0.718333057 0.742272079 0.751431889 0.759445807 0.771348537 0.773879167 0.779632838 0.811009290 0.816409944 0.819996267 0.822994604 0.823682354 0.831913888 0.835018327 0.837856442 0.842588362 0.845945258 0.847665061 0.850128481 0.859481528 0.865949415 0.868383206 0.874533696 0.886163698 0.887048373 0.889766050 0.900377682 0.901097566 0.904164483 0.923909072 0.928060854 0.936569223 0.937878354 0.966278803 0.976411827 0.986967373 1.001718681 1.020262566 1.028676693 1.042277856 1.051549376 1.057913148 1.068883296 1.086975399 1.088846310 1.104881293 1.108106129 1.112625277 1.127345426 1.136015839 1.140825543 1.144852115 1.176481792 1.179123692 1.181809770 1.187110275 1.191607788 1.198094239 1.224742786 1.228724095 1.274489468 1.302804840 1.321389938 1.328419325 1.333227326 1.336540025 1.338113576 1.342365129 1.343446124 1.345046183 1.359591085 1.379538382 1.383284992 1.385766493 1.410577428 1.420556995 1.431870726 1.551510505 1.685432474 1.776272548</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">284</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33742033" y3="0.03744608" z3="-0.19249913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3813508" y3="0.16763054" z3="0.42277854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64185947" y3="0.44020544" z3="-0.33648965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72180077" y3="1.23084606" z3="-2.25640857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38502932" y3="0.42025843" z3="-1.18457778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72606755" y3="0.83743257" z3="-3.66162988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62511862" y3="1.74189243" z3="-3.12731807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37058443" y3="2.58083068" z3="-4.60629746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55691379" y3="1.23929876" z3="-4.37336441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49058706" y3="2.91481421" z3="-5.16479133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92920058" y3="-0.49313063" z3="-3.4483894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09697739" y3="0.02288243" z3="-1.00573117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40340096" y3="-1.11615347" z3="-2.0129898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93135698" y3="-0.9881091" z3="-1.84169695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10606441" y3="-2.44088414" z3="-1.86407521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14134123" y3="-3.60892203" z3="0.67109353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02793233" y3="-5.2759719" z3="-4.73838143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25335438" y3="-5.01335337" z3="-3.70123595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84392423" y3="-4.30924039" z3="-1.08334838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7744114" y3="-4.60494604" z3="-2.85294687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5690929" y3="-5.09613119" z3="-3.2401847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86519518" y3="-4.7388109" z3="-1.92717943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49106203" y3="-4.2677095" z3="-1.52786775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80606771" y3="-4.52742618" z3="-3.20173584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37046758" y3="-5.41019286" z3="-3.91260937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.900504" y3="-4.77397204" z3="-1.58188866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0300728" y3="-3.85435589" z3="0.23577626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16907676" y3="-3.63656909" z3="0.8814194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05798741" y3="-4.09890725" z3="0.45024841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16249991" y3="-3.49648073" z3="2.34795988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21775711" y3="-3.30301756" z3="5.14535562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35934123" y3="-3.69202095" z3="3.05264507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99328864" y3="-3.21042025" z3="3.0681369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01795325" y3="-3.11484401" z3="4.45656291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38628442" y3="-3.59702894" z3="4.44119834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27652237" y3="-3.92742642" z3="2.50554093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03338749" y3="-3.08484408" z3="2.56271165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08634747" y3="-2.91479268" z3="4.99438871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32568667" y3="-3.75946715" z3="4.97740352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23667573" y3="-3.23611517" z3="6.23674371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41481851" y3="-3.90180529" z3="-0.62789317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17447695" y3="-3.40490363" z3="-1.08533292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52057784" y3="0.2317928" z3="-4.71568077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07576526" y3="-1.71087318" z3="0.01901944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.8942718" y3="-0.95463805" z3="1.17637092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8304162" y3="-0.30459854" z3="1.50263761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35282386" y3="0.56290037" z3="1.20153544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4245306" y3="1.45049113" z3="-0.43158163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9942401" y3="-0.69646436" z3="1.39318875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33957112" y3="1.76722332" z3="2.6363578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8659586" y3="-0.93809766" z3="2.07769227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6313073" y3="-0.31932076" z3="3.33258402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19332818" y3="0.75268767" z3="-1.25426974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35693859" y3="2.23311763" z3="-0.43408479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.3999788" y3="1.94186852" z3="-0.59407543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01655534" y3="-1.05797854" z3="2.43462522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96943651" y3="-0.23739893" z3="1.15853225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87012644" y3="-1.54000708" z3="0.69458462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4009632" y3="1.23649932" z3="3.60301853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5988347" y3="2.35104214" z3="2.63231274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17863837" y3="2.48314754" z3="2.57758291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76962475" y3="-0.77657667" z3="3.84460839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5450281" y3="-0.48716669" z3="3.91791921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45668383" y3="0.76178483" z3="3.20687489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84090464" y3="-0.72621399" z3="0.98693502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40841356" y3="-2.05032566" z3="0.84101061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75688107" y3="-2.70033047" z3="1.88173044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55642037" y3="-2.0138473" z3="3.07592126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04305661" y3="-0.7258478" z3="3.27866645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69288741" y3="-0.08887393" z3="2.22613307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50797813" y3="-2.54263969" z3="-0.12770506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35452897" y3="-3.7060521" z3="1.75213503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69629044" y3="-2.61595661" z3="4.09957864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86805304" y3="-0.22192796" z3="4.22998511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04063181" y3="0.94054394" z3="2.34710115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79841492" y3="0.45041098" z3="-4.29523696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77615125" y3="-0.51909221" z3="-4.47594569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42437412" y3="-1.7111145" z3="-5.09812329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13591586" y3="-1.94007064" z3="-5.5712103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83445637" y3="-0.96731169" z3="-5.37039553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04634227" y3="1.37373553" z3="-3.76548479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79616157" y3="-0.37427855" z3="-4.11892285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4341137" y3="-2.7623105" z3="-5.2394551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09768963" y3="-2.88080281" z3="-6.07020282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85748547" y3="-1.15190177" z3="-5.70224437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37929115" y3="-1.92856998" z3="5.05065734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30875472" y3="-3.7520236" z3="3.92252672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20636028" y3="-3.66585365" z3="-6.01525851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43919678" y3="-2.67667235" z3="-4.56206615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06382719" y3="1.17139718" z3="-1.48000639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10286498" y3="1.55856595" z3="-2.45898611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4304623" y3="1.5125137" z3="-1.67165464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.83853778" y3="2.18928767" z3="-2.79501194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15667886" y3="1.21512508" z3="-0.90890571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8933858" y3="2.4411393" z3="-2.93426285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56118154" y3="2.23916017" z3="-3.62120637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89116199" y3="2.54638449" z3="-3.78427667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84006921" y3="2.51056688" z3="-4.39570837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22120909" y3="3.06428208" z3="-4.6893638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.38592997" y3="3.14572966" z3="-3.31500256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.26976636" y3="3.55675709" z3="-4.10173614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.18550249" y3="4.15752915" z3="-2.711971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.92627181" y3="5.49039026" z3="-2.92611049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.01449846" y3="3.86935904" z3="-2.0636644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.55646731" y3="6.24697181" z3="-2.44946638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.03620117" y3="4.94293999" z3="-4.31750034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.84901546" y3="5.89293052" z3="-3.75071881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.18433057" y3="5.23941284" z3="-4.93731201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6582189" y3="6.95619195" z3="-3.92058083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47642951" y3="-2.18604973" z3="-0.2931554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45123877" y3="-2.98266241" z3="-1.05587525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00361808" y3="-2.56187457" z3="0.59838927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08989766" y3="-1.36672286" z3="-0.71374171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17468332" y3="-1.42233878" z3="-1.15529682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30899183" y3="-0.38189995" z3="-1.50646278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09872213" y3="-1.54874961" z3="-0.95204824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41972477" y3="-2.0793627" z3="-2.00338469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3374,.0374,-.1925;7.3814,.1676,.4228;6.6419,.4402,-.3365;4.7218,1.2308,-2.2564;4.385,.4203,-1.1846;2.7261,.8374,-3.6616;3.6251,1.7419,-3.1273;1.3706,2.5808,-4.6063;1.5569,1.2393,-4.3734;.4906,2.9148,-5.1648;2.9292,-.4931,-3.4484;3.097,.0229,-1.0057;2.4034,-1.1162,-2.013;.9314,-.9881,-1.8417;3.1061,-2.4409,-1.8641;-.1413,-3.6089,.6711;-.0279,-5.276,-4.7384;-.2534,-5.0134,-3.7012;-.8439,-4.3092,-1.0833;.7744,-4.6049,-2.8529;-1.5691,-5.0961,-3.2402;-1.8652,-4.7388,-1.9272;.4911,-4.2677,-1.5279;1.8061,-4.5274,-3.2017;-2.3705,-5.4102,-3.9126;-2.9005,-4.774,-1.5819;-1.0301,-3.8544,.2358;-2.1691,-3.6366,.8814;-3.058,-4.0989,.4502;-2.1625,-3.4965,2.348;-2.2178,-3.303,5.1454;-3.3593,-3.692,3.0526;-.9933,-3.2104,3.0681;-1.018,-3.1148,4.4566;-3.3863,-3.597,4.4412;-4.2765,-3.9274,2.5055;-.0334,-3.0848,2.5627;-.0863,-2.9148,4.9944;-4.3257,-3.7595,4.9774;-2.2367,-3.2361,6.2367;1.4148,-3.9018,-.6279;2.1745,-3.4049,-1.0853;.5206,.2318,-4.7157;-3.0758,-1.7109,.019;-2.8943,-.9546,1.1764;-1.8304,-.3046,1.5026;-.3528,.5629,1.2015;-.4245,1.4505,-.4316;.9942,-.6965,1.3932;-.3396,1.7672,2.6364;-3.866,-.9381,2.0777;-3.6313,-.3193,3.3326;-.1933,.7527,-1.2543;.3569,2.2331,-.4341;-1.4,1.9419,-.5941;1.0166,-1.058,2.4346;1.9694,-.2374,1.1585;.8701,-1.54,.6946;-.401,1.2365,3.603;.5988,2.351,2.6323;-1.1786,2.4831,2.5776;-2.7696,-.7766,3.8446;-4.545,-.4872,3.9179;-3.4567,.7618,3.2069;4.8409,-.7262,.9869;4.4084,-2.0503,.841;3.7569,-2.7003,1.8817;3.5564,-2.0138,3.0759;4.0431,-.7258,3.2787;4.6929,-.0889,2.2261;4.508,-2.5426,-.1277;3.3545,-3.7061,1.7521;2.6963,-2.616,4.0996;3.8681,-.2219,4.23;5.0406,.9405,2.3471;-.7984,.4504,-4.2952;-1.7762,-.5191,-4.4759;-1.4244,-1.7111,-5.0981;-.1359,-1.9401,-5.5712;.8345,-.9673,-5.3704;-1.0463,1.3737,-3.7655;-2.7962,-.3743,-4.1189;-2.4341,-2.7623,-5.2395;.0977,-2.8808,-6.0702;1.8575,-1.1519,-5.7022;2.3793,-1.9286,5.0507;2.3088,-3.752,3.9225;-2.2064,-3.6659,-6.0153;-3.4392,-2.6767,-4.5621;7.0638,1.1714,-1.48;6.1029,1.5586,-2.459;8.4305,1.5125,-1.6717;8.8385,2.1893,-2.795;9.1567,1.2151,-.9089;9.8934,2.4411,-2.9343;6.5612,2.2392,-3.6212;7.8912,2.5464,-3.7843;5.8401,2.5106,-4.3957;8.2212,3.0643,-4.6894;3.3859,3.1457,-3.315;2.2698,3.5568,-4.1017;4.1855,4.1575,-2.712;3.9263,5.4904,-2.9261;5.0145,3.8694,-2.0637;4.5565,6.247,-2.4495;2.0362,4.9429,-4.3175;2.849,5.8929,-3.7507;1.1843,5.2394,-4.9373;2.6582,6.9562,-3.9206;-4.4764,-2.186,-.2932;-4.4512,-2.9827,-1.0559;-5.0036,-2.5619,.5984;-5.0899,-1.3667,-.7137;-2.1747,-1.4223,-1.1553;-2.309,-.3819,-1.5065;-1.0987,-1.5487,-.952;-2.4197,-2.0794,-2.0034;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650413958028</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001030029052 0.000238718894 0.015179881396 0.005226362132</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030714914 -0.000290436 0.000109752 0.000173775 0.000239784 0.000353057 0.000402062 0.000584341 0.000703321 0.000859607 0.001016897 0.001115742 0.001229220 0.001344833 0.001418546 0.001478047 0.001536292 0.001707901 0.001819820 0.001892581 0.002146218 0.002349803 0.002444457 0.002576140 0.002681188 0.003022645 0.003110821 0.003351721 0.003527011 0.003912917 0.004462816 0.004691605 0.004765532 0.005087465 0.006040116 0.006107111 0.006320006 0.006654458 0.006997891 0.007727663 0.008133921 0.008180734 0.008366779 0.009388833 0.009957133 0.010150542 0.010591193 0.011160198 0.011958061 0.012154749 0.013019794 0.013129635 0.014194961 0.014725014 0.015372503 0.015601084 0.015948818 0.016610968 0.016779111 0.017518401 0.018176068 0.018697047 0.019418238 0.019622856 0.020196654 0.020712818 0.021267808 0.021458592 0.022394970 0.023128964 0.024053446 0.026400554 0.026861784 0.027809679 0.028033736 0.029558213 0.030374065 0.031610745 0.033293238 0.033660288 0.034138497 0.035798335 0.037158910 0.037481778 0.039527718 0.040044287 0.040547533 0.040988129 0.042570854 0.044688257 0.045539530 0.047122012 0.048022985 0.049277095 0.050502509 0.051075144 0.051280651 0.051635155 0.052489278 0.052698271 0.052948442 0.053196236 0.054781900 0.054978541 0.056053371 0.056306124 0.056572803 0.056936851 0.057227181 0.059196418 0.060572172 0.061053952 0.061781846 0.062411413 0.063415071 0.064535966 0.065321844 0.066001897 0.066622191 0.068391383 0.069142232 0.070279891 0.072756663 0.074418769 0.074798392 0.076521482 0.078695108 0.084334995 0.086829011 0.087150348 0.087631708 0.089379258 0.090652599 0.091486599 0.094100640 0.094987536 0.095807776 0.096459934 0.097856163 0.098834900 0.100206215 0.100294747 0.100959163 0.102515077 0.103220110 0.103676485 0.104457699 0.104619858 0.106347833 0.107023329 0.108173577 0.109921658 0.111103234 0.112436038 0.113542328 0.115049068 0.116271307 0.116833485 0.118736690 0.121236954 0.122444214 0.123427937 0.125019939 0.126217788 0.126330854 0.126689016 0.127406383 0.132116320 0.135102262 0.135848898 0.142848256 0.143880365 0.147082754 0.147587608 0.149754600 0.152209433 0.154704709 0.155181646 0.156652159 0.161518003 0.161988319 0.173779532 0.174301502 0.181628453 0.184992064 0.186460127 0.189645994 0.190430934 0.194179039 0.195464732 0.198731162 0.200335189 0.205256489 0.207073202 0.207403051 0.210258044 0.216525719 0.217054105 0.217966967 0.219702035 0.220856792 0.225329903 0.226723645 0.232385673 0.235180786 0.235712441 0.236065761 0.244693916 0.256124342 0.257292202 0.263974639 0.269980585 0.280756440 0.283426860 0.286357881 0.291929340 0.297022195 0.304427754 0.305964379 0.307323533 0.314487766 0.316785061 0.317413232 0.322242430 0.330142583 0.332891019 0.351832683 0.352827080 0.355107230 0.355888025 0.360103354 0.363044094 0.364435867 0.384154260 0.386058367 0.392251954 0.410591713 0.425997046 0.431210734 0.462462611 0.469168036 0.478968974 0.484373500 0.484601304 0.487617911 0.491485293 0.509675465 0.515607598 0.535427759 0.569304102 0.575244291 0.591710737 0.594088006 0.607362558 0.608443663 0.644930600 0.647660506 0.649762338 0.674409002 0.678447680 0.686676166 0.692329337 0.693668697 0.700058496 0.704777563 0.718347941 0.742272088 0.751432121 0.759445838 0.771441340 0.773932611 0.779633220 0.811009254 0.816416629 0.820022379 0.823006171 0.823689954 0.831961723 0.835018667 0.837857724 0.842588392 0.845945499 0.847665270 0.850149069 0.859494785 0.865949969 0.868441065 0.874545204 0.886166966 0.887140387 0.889769016 0.900439315 0.901097948 0.904164641 0.923932709 0.928067325 0.936570928 0.937878318 0.966294524 0.976411959 0.986997481 1.001720503 1.020262624 1.028679179 1.042311461 1.051612723 1.057960431 1.068884970 1.086975406 1.088852421 1.104895101 1.108111283 1.112641535 1.127381183 1.136032985 1.140873300 1.144889603 1.176484318 1.179127319 1.181809876 1.187140792 1.191608081 1.198094303 1.224744754 1.228754893 1.274507494 1.302806084 1.321389992 1.328426348 1.333237599 1.336553064 1.338119564 1.342370860 1.343522439 1.345053457 1.359616560 1.379538298 1.383292727 1.385766389 1.410577588 1.420558955 1.431870732 1.551510642 1.685432387 1.776277076</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">285</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33913985" y3="0.04204951" z3="-0.19206572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38396764" y3="0.16732126" z3="0.42013295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64422959" y3="0.44041524" z3="-0.33867241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72389124" y3="1.23237694" z3="-2.25779556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38652541" y3="0.42499922" z3="-1.18384603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72663062" y3="0.83914508" z3="-3.66071808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62748094" y3="1.74330194" z3="-3.12912801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37295103" y3="2.58257378" z3="-4.60799208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55760808" y3="1.24125703" z3="-4.37242355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49304395" y3="2.91674226" z3="-5.16648464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9280081" y3="-0.4912341" z3="-3.44495515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09789228" y3="0.0298323" z3="-1.00335437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40332483" y3="-1.11105796" z3="-2.00781394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93143666" y3="-0.982597" z3="-1.83564729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10624383" y3="-2.43548039" z3="-1.85711181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14164015" y3="-3.6105384" z3="0.67112566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02110835" y3="-5.26909263" z3="-4.74007833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24819478" y3="-5.00784891" z3="-3.70296504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84258473" y3="-4.3076862" z3="-1.08516168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77800322" y3="-4.59940382" z3="-2.85298614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56417681" y3="-5.09268629" z3="-3.24376578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86218999" y3="-4.73724456" z3="-1.9306646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49280498" y3="-4.26419" z3="-1.52781268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81062379" y3="-4.52200214" z3="-3.2005934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36435398" y3="-5.40664428" z3="-3.91756899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89842081" y3="-4.77244737" z3="-1.58657626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03046809" y3="-3.85488983" z3="0.23441773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17000579" y3="-3.63939418" z3="0.87983736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05847893" y3="-4.10159186" z3="0.44731036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16429337" y3="-3.50173893" z3="2.34659405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22132886" y3="-3.31282406" z3="5.14423146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36124442" y3="-3.70050103" z3="3.05029275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99576972" y3="-3.214793" z3="3.06785851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02151568" y3="-3.12112835" z3="4.4563588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38894487" y3="-3.60804991" z3="4.43900438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27748894" y3="-3.93703378" z3="2.50235844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03565816" y3="-3.0866931" z3="2.56315198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09103578" y3="-2.91901068" z3="4.99478185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32793329" y3="-3.7738566" z3="4.97440405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24102776" y3="-3.24756292" z3="6.23568896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41496079" y3="-3.8990294" z3="-0.62597296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17507687" y3="-3.40041809" z3="-1.08145512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52022304" y3="0.23410391" z3="-4.71318729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07756932" y3="-1.7129589" z3="0.01993978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89784507" y3="-0.95910933" z3="1.17893851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83448508" y3="-0.30929027" z3="1.50766955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35748551" y3="0.55983419" z3="1.20818716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43041924" y3="1.45186585" z3="-0.42245529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99087051" y3="-0.69872138" z3="1.39577677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34440162" y3="1.75997877" z3="2.64652316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87048361" y3="-0.94493732" z3="2.07928157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63732446" y3="-0.3285438" z3="3.3357257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.1978066" y3="0.75647551" z3="-1.24692898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34981047" y3="2.23585556" z3="-0.42252472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40673472" y3="1.94211382" z3="-0.58397462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01487125" y3="-1.06120987" z3="2.43691084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96553188" y3="-0.23874487" z3="1.16002159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86655365" y3="-1.5417324" z3="0.69677732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40449899" y3="1.22636847" z3="3.61163559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59354006" y3="2.34462415" z3="2.64346629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18415057" y3="2.47534098" z3="2.59067195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77578508" y3="-0.78642451" z3="3.84758481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55155167" y3="-0.49803703" z3="3.91988939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46321082" y3="0.75289215" z3="3.212359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84190192" y3="-0.71926853" z3="0.98870426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41243335" y3="-2.04469284" z3="0.84550007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76030505" y3="-2.69326412" z3="1.88680337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55547051" y3="-2.0038273" z3="3.07837378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03864356" y3="-0.71410753" z3="3.27839566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68979502" y3="-0.07873132" z3="2.22574269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51444379" y3="-2.53922218" z3="-0.12201257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36069977" y3="-3.70023904" z3="1.75955192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69411183" y3="-2.60489401" z3="4.1016405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86000838" y3="-0.20767832" z3="4.22757834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03547743" y3="0.95176003" z3="2.34477384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79832373" y3="0.45388253" z3="-4.2923987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.776925" y3="-0.51472176" z3="-4.47224674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42646781" y3="-1.70699528" z3="-5.09484453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1385275" y3="-1.93728217" z3="-5.56865136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83289034" y3="-0.96538556" z3="-5.36754873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04528765" y3="1.37753612" z3="-3.76265394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79669817" y3="-0.36902117" z3="-4.11492446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43725594" y3="-2.75711441" z3="-5.23633506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09390481" y3="-2.87815754" z3="-6.06775991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8556473" y3="-1.15089612" z3="-5.69972416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37210859" y3="-1.91498742" z3="5.04928615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31056974" y3="-3.74283056" z3="3.92753468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21116241" y3="-3.65988915" z3="-6.01342135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44147873" y3="-2.67134981" z3="-4.55769986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06659541" y3="1.16850022" z3="-1.48412116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10545886" y3="1.5563988" z3="-2.46260219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43392098" y3="1.50579604" z3="-1.67827462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84223692" y3="2.17858356" z3="-2.80379646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16044814" y3="1.20844969" z3="-0.91575803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89764297" y3="2.42752334" z3="-2.94497616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56405101" y3="2.23341708" z3="-3.62688444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89445071" y3="2.53584208" z3="-3.79263863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84265113" y3="2.50511159" z3="-4.40100808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22463359" y3="3.05059981" z3="-4.69940677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39058528" y3="3.14696977" z3="-3.32020245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27438754" y3="3.55790471" z3="-4.10694278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19263417" y3="4.15893002" z3="-2.72062328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93574451" y3="5.49167403" z3="-2.93816803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02173411" y3="3.87097544" z3="-2.07236901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56816176" y3="6.24814839" z3="-2.46464626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04316073" y3="4.94393221" z3="-4.32611932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8583663" y3="5.89396485" z3="-3.76272553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19114167" y3="5.24041005" z3="-4.94573489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66934759" y3="6.95715197" z3="-3.93523215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47753883" y3="-2.18846055" z3="-0.29465306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45130349" y3="-2.98350382" z3="-1.05912519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00537554" y3="-2.56646991" z3="0.59562025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09110866" y3="-1.36856735" z3="-0.71399456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17566751" y3="-1.42155174" z3="-1.15295153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31100221" y3="-0.38127635" z3="-1.50289901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09928103" y3="-1.54799973" z3="-0.94944804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41932619" y3="-2.0774987" z3="-2.00224949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.042,-.1921;7.384,.1673,.4201;6.6442,.4404,-.3387;4.7239,1.2324,-2.2578;4.3865,.425,-1.1838;2.7266,.8391,-3.6607;3.6275,1.7433,-3.1291;1.373,2.5826,-4.608;1.5576,1.2413,-4.3724;.493,2.9167,-5.1665;2.928,-.4912,-3.445;3.0979,.0298,-1.0034;2.4033,-1.1111,-2.0078;.9314,-.9826,-1.8356;3.1062,-2.4355,-1.8571;-.1416,-3.6105,.6711;-.0211,-5.2691,-4.7401;-.2482,-5.0078,-3.703;-.8426,-4.3077,-1.0852;.778,-4.5994,-2.853;-1.5642,-5.0927,-3.2438;-1.8622,-4.7372,-1.9307;.4928,-4.2642,-1.5278;1.8106,-4.522,-3.2006;-2.3644,-5.4066,-3.9176;-2.8984,-4.7724,-1.5866;-1.0305,-3.8549,.2344;-2.17,-3.6394,.8798;-3.0585,-4.1016,.4473;-2.1643,-3.5017,2.3466;-2.2213,-3.3128,5.1442;-3.3612,-3.7005,3.0503;-.9958,-3.2148,3.0679;-1.0215,-3.1211,4.4564;-3.3889,-3.608,4.439;-4.2775,-3.937,2.5024;-.0357,-3.0867,2.5632;-.091,-2.919,4.9948;-4.3279,-3.7739,4.9744;-2.241,-3.2476,6.2357;1.415,-3.899,-.626;2.1751,-3.4004,-1.0815;.5202,.2341,-4.7132;-3.0776,-1.713,.0199;-2.8978,-.9591,1.1789;-1.8345,-.3093,1.5077;-.3575,.5598,1.2082;-.4304,1.4519,-.4225;.9909,-.6987,1.3958;-.3444,1.76,2.6465;-3.8705,-.9449,2.0793;-3.6373,-.3285,3.3357;-.1978,.7565,-1.2469;.3498,2.2359,-.4225;-1.4067,1.9421,-.584;1.0149,-1.0612,2.4369;1.9655,-.2387,1.16;.8666,-1.5417,.6968;-.4045,1.2264,3.6116;.5935,2.3446,2.6435;-1.1842,2.4753,2.5907;-2.7758,-.7864,3.8476;-4.5516,-.498,3.9199;-3.4632,.7529,3.2124;4.8419,-.7193,.9887;4.4124,-2.0447,.8455;3.7603,-2.6933,1.8868;3.5555,-2.0038,3.0784;4.0386,-.7141,3.2784;4.6898,-.0787,2.2257;4.5144,-2.5392,-.122;3.3607,-3.7002,1.7596;2.6941,-2.6049,4.1016;3.86,-.2077,4.2276;5.0355,.9518,2.3448;-.7983,.4539,-4.2924;-1.7769,-.5147,-4.4722;-1.4265,-1.707,-5.0948;-.1385,-1.9373,-5.5687;.8329,-.9654,-5.3675;-1.0453,1.3775,-3.7627;-2.7967,-.369,-4.1149;-2.4373,-2.7571,-5.2363;.0939,-2.8782,-6.0678;1.8556,-1.1509,-5.6997;2.3721,-1.915,5.0493;2.3106,-3.7428,3.9275;-2.2112,-3.6599,-6.0134;-3.4415,-2.6713,-4.5577;7.0666,1.1685,-1.4841;6.1055,1.5564,-2.4626;8.4339,1.5058,-1.6783;8.8422,2.1786,-2.8038;9.1604,1.2084,-.9158;9.8976,2.4275,-2.945;6.5641,2.2334,-3.6269;7.8945,2.5358,-3.7926;5.8427,2.5051,-4.401;8.2246,3.0506,-4.6994;3.3906,3.147,-3.3202;2.2744,3.5579,-4.1069;4.1926,4.1589,-2.7206;3.9357,5.4917,-2.9382;5.0217,3.871,-2.0724;4.5682,6.2481,-2.4646;2.0432,4.9439,-4.3261;2.8584,5.894,-3.7627;1.1911,5.2404,-4.9457;2.6693,6.9572,-3.9352;-4.4775,-2.1885,-.2947;-4.4513,-2.9835,-1.0591;-5.0054,-2.5665,.5956;-5.0911,-1.3686,-.714;-2.1757,-1.4216,-1.153;-2.311,-.3813,-1.5029;-1.0993,-1.548,-.9494;-2.4193,-2.0775,-2.0022;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424356099</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000342767773 0.000070852988 0.019673225380 0.005335257207</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030715023 -0.001929800 0.000030751 0.000086893 0.000221068 0.000346098 0.000382020 0.000586494 0.000702801 0.000847286 0.001002992 0.001102857 0.001221316 0.001336073 0.001411666 0.001479094 0.001527547 0.001721836 0.001823286 0.001889903 0.002144286 0.002349598 0.002445854 0.002571085 0.002676335 0.003020496 0.003106831 0.003333211 0.003530780 0.003910453 0.004456295 0.004690835 0.004765875 0.005091632 0.006044013 0.006100895 0.006319884 0.006652463 0.006994314 0.007705187 0.008132328 0.008163437 0.008362552 0.009396230 0.009952911 0.010143301 0.010577816 0.011158448 0.011957502 0.012148916 0.013028980 0.013126535 0.014217020 0.014725185 0.015369539 0.015649465 0.015965332 0.016662390 0.016766909 0.017521434 0.018191420 0.018735864 0.019415582 0.019622222 0.020198155 0.020704386 0.021268993 0.021455646 0.022371910 0.023122660 0.024012895 0.026402250 0.026870636 0.027810416 0.028131836 0.029558128 0.030405670 0.031614148 0.033299700 0.033662111 0.034144660 0.035797223 0.037164084 0.037468209 0.039527958 0.040069730 0.040481113 0.040975815 0.042572936 0.044688780 0.045553107 0.047127542 0.048026740 0.049279727 0.050501798 0.051077199 0.051299081 0.051652751 0.052489334 0.052698731 0.052954808 0.053216528 0.054815233 0.054979615 0.056058219 0.056334228 0.056573863 0.056962889 0.057227201 0.059200917 0.060572961 0.061056283 0.061805827 0.062413485 0.063415603 0.064535986 0.065320120 0.066002929 0.066625275 0.068402117 0.069142351 0.070278717 0.072757654 0.074424592 0.074803552 0.076525141 0.078700590 0.084351963 0.086838277 0.087150584 0.087634089 0.089413832 0.090661616 0.091488096 0.094149512 0.094987316 0.095816870 0.096470897 0.097856272 0.098834962 0.100211284 0.100587279 0.101014893 0.102558335 0.103221608 0.103734300 0.104476900 0.104699219 0.106352028 0.107029951 0.108175454 0.109973382 0.111134425 0.112439145 0.113540514 0.115062560 0.116274233 0.116839909 0.118745660 0.121307230 0.122463408 0.123606721 0.125129380 0.126225721 0.126333548 0.126695547 0.127496029 0.132123585 0.135106983 0.135856409 0.142848998 0.143890234 0.147082357 0.147592150 0.149762924 0.152184365 0.154704770 0.155172266 0.156661869 0.161494341 0.161991275 0.173777794 0.174308470 0.181670234 0.185090173 0.186459403 0.189645682 0.190449476 0.194179684 0.195533302 0.198739293 0.200345820 0.205256678 0.207080645 0.207422563 0.210265123 0.216536836 0.217065229 0.217972396 0.219831140 0.220867330 0.225359253 0.226731889 0.232386220 0.235180670 0.235715024 0.236081037 0.244702450 0.256129362 0.257295542 0.263992066 0.269981589 0.280762329 0.283467691 0.286357973 0.291955548 0.297030974 0.304437422 0.305983088 0.307323091 0.314487592 0.316785572 0.317412850 0.322242568 0.330150526 0.332899195 0.351835451 0.352830110 0.355104565 0.355922173 0.360104703 0.363045529 0.364499751 0.384152553 0.386066342 0.392255009 0.410592570 0.426004845 0.431226190 0.462463479 0.469191996 0.479022570 0.484376197 0.484601967 0.487619004 0.491486976 0.509677075 0.515609059 0.535425310 0.569305328 0.575259954 0.591693844 0.594095742 0.607364910 0.608469557 0.644937390 0.647743954 0.649764686 0.674422606 0.678453568 0.686788079 0.692456618 0.693689783 0.700074827 0.704779512 0.718396421 0.742271624 0.751432993 0.759446201 0.771673560 0.774102402 0.779635079 0.811009333 0.816438541 0.820082565 0.823033611 0.823709957 0.832093154 0.835019986 0.837860917 0.842588691 0.845945820 0.847665330 0.850195114 0.859527734 0.865951222 0.868618828 0.874569480 0.886172313 0.887375334 0.889778425 0.900612771 0.901099016 0.904165516 0.923989229 0.928086901 0.936575439 0.937879454 0.966330685 0.976413517 0.987083394 1.001725894 1.020264020 1.028683060 1.042393669 1.051765028 1.058080649 1.068890202 1.086975764 1.088863822 1.104934983 1.108123711 1.112678989 1.127490230 1.136075148 1.140991762 1.144987393 1.176491036 1.179137145 1.181812417 1.187222666 1.191609704 1.198096795 1.224748315 1.228839227 1.274620306 1.302807979 1.321395067 1.328432630 1.333247601 1.336571884 1.338137075 1.342328365 1.343676101 1.345078103 1.359675108 1.379539506 1.383310574 1.385766537 1.410479769 1.420562240 1.431830618 1.551510633 1.685437221 1.776288165</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">286</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33660953" y3="0.03899985" z3="-0.19257055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38027137" y3="0.16240734" z3="0.42130235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64143019" y3="0.43501698" z3="-0.33857425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72354043" y3="1.22934411" z3="-2.25886691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38500571" y3="0.42196905" z3="-1.18543902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72584761" y3="0.84006794" z3="-3.66285878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6279801" y3="1.74217798" z3="-3.13024593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37468955" y3="2.58692279" z3="-4.60840902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55774303" y3="1.24489535" z3="-4.37440238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49550039" y3="2.9228623" z3="-5.16688607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92486787" y3="-0.49094701" z3="-3.44887416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0959563" y3="0.02683868" z3="-1.00636421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40121201" y3="-1.11264011" z3="-2.01226368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9295095" y3="-0.98463039" z3="-1.83818394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10452045" y3="-2.43719003" z3="-1.86412933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13734867" y3="-3.61208368" z3="0.67000382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03020586" y3="-5.26360097" z3="-4.74324051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25480786" y3="-5.00506679" z3="-3.70495307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84234751" y3="-4.31065606" z3="-1.08447028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77302983" y3="-4.59772017" z3="-2.85677411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56872775" y3="-5.09269619" z3="-3.24262805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86302716" y3="-4.7404354" z3="-1.92777154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49155061" y3="-4.26550061" z3="-1.53013187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80634813" y3="-4.52264337" z3="-3.20745682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37066347" y3="-5.40466973" z3="-3.91528814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89972492" y3="-4.7736346" z3="-1.58067128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02785563" y3="-3.85719267" z3="0.23535581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16654893" y3="-3.64237346" z3="0.88255124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05489518" y3="-4.10716903" z3="0.45221545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1593322" y3="-3.50253893" z3="2.34911407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21370465" y3="-3.30985689" z3="5.14650227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35511545" y3="-3.7037776" z3="3.05441126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99048136" y3="-3.21078843" z3="3.06863042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01522301" y3="-3.11526564" z3="4.45695862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38134635" y3="-3.60954269" z3="4.44305301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27070477" y3="-3.94492303" z3="2.50805615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03120391" y3="-3.07991599" z3="2.56221895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08606554" y3="-2.90816839" z3="4.99422103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31837117" y3="-3.77867783" z3="4.97961301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23233875" y3="-3.24310205" z3="6.23784517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41600534" y3="-3.90154991" z3="-0.62994539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17525934" y3="-3.40259593" z3="-1.08711099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51976379" y3="0.23839325" z3="-4.71682703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07597362" y3="-1.71959934" z3="0.0202267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89784627" y3="-0.96485705" z3="1.17854825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83471892" y3="-0.31408322" z3="1.5065222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36323319" y3="0.56422148" z3="1.20728939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43871573" y3="1.45090044" z3="-0.42612909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99246037" y3="-0.68591653" z3="1.39843538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36029864" y3="1.76812776" z3="2.64279716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87041294" y3="-0.95133007" z3="2.07882152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63806352" y3="-0.33236318" z3="3.33437572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19622066" y3="0.75394451" z3="-1.24704276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33326826" y3="2.2433618" z3="-0.42586316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41971123" y3="1.93051636" z3="-0.59366373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01736195" y3="-1.04664637" z3="2.44016507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96569906" y3="-0.22230552" z3="1.16210106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87303044" y3="-1.53116702" z3="0.70148205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41996674" y3="1.23695963" z3="3.60930264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57448552" y3="2.35797925" z3="2.64053036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20382379" y3="2.47882243" z3="2.58313568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77494307" y3="-0.78733629" z3="3.84642018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55177189" y3="-0.50315561" z3="3.91940321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46681821" y3="0.74941616" z3="3.20920046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83884499" y3="-0.72135712" z3="0.98862589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40166667" y3="-2.04456789" z3="0.84573859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75147233" y3="-2.69096676" z3="1.88964591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55488787" y3="-2.00163705" z3="3.08240358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04481205" y3="-0.71438528" z3="3.28123421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69523671" y3="-0.08129167" z3="2.22690489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49625809" y3="-2.53857912" z3="-0.12357596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34739522" y3="-3.69605638" z3="1.76399556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69688838" y3="-2.60028461" z3="4.1099245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8725398" y3="-0.20776865" z3="4.23104329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04761071" y3="0.94737888" z3="2.34601878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79712421" y3="0.45456066" z3="-4.29021951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77504219" y3="-0.51445632" z3="-4.46957215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42547172" y3="-1.70354193" z3="-5.09886371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13972612" y3="-1.92995887" z3="-5.58051315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83128681" y3="-0.95725753" z3="-5.37828422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04303619" y3="1.3752901" z3="-3.75470868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79355685" y3="-0.37187833" z3="-4.10752079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43517254" y3="-2.75488949" z3="-5.23980444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09199848" y3="-2.86793524" z3="-6.08516312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85273504" y3="-1.13938746" z3="-5.71624995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.38101998" y3="-1.90927453" z3="5.05925992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31002234" y3="-3.737582" z3="3.9376772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21042794" y3="-3.65524144" z3="-6.01989428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43697375" y3="-2.67260492" z3="-4.55738508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06528159" y3="1.16356276" z3="-1.48340309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10545403" y3="1.55268126" z3="-2.46252514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43312784" y3="1.50157032" z3="-1.67574155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84262058" y3="2.17394503" z3="-2.8007944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15889985" y3="1.20447546" z3="-0.91229608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89839941" y3="2.42368291" z3="-2.94048446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56558549" y3="2.23039674" z3="-3.62614715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89575965" y3="2.53084708" z3="-3.79076267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84504952" y3="2.50223906" z3="-4.40102082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22699711" y3="3.04517832" z3="-4.69713851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39316435" y3="3.14625539" z3="-3.32023069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27796272" y3="3.55955665" z3="-4.10718415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19607303" y3="4.15665757" z3="-2.71864222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94104573" y3="5.49008825" z3="-2.93449583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02418473" y3="3.86693876" z3="-2.07000213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57465693" y3="6.2445644" z3="-2.46031542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04897006" y3="4.94616637" z3="-4.32494488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86490295" y3="5.89467486" z3="-3.75946425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19763281" y3="5.24482742" z3="-4.9444561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67720286" y3="6.95848256" z3="-3.93051599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47514909" y3="-2.19723919" z3="-0.29426632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44861008" y3="-2.99213522" z3="-1.05934322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00185" y3="-2.57662808" z3="0.59616891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09049481" y3="-1.37801764" z3="-0.71241896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17424608" y3="-1.42624718" z3="-1.15213114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30796586" y3="-0.38602265" z3="-1.49972258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09684723" y3="-1.55655964" z3="-0.95040586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41967686" y3="-2.07943379" z3="-2.00284541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3366,.039,-.1926;7.3803,.1624,.4213;6.6414,.435,-.3386;4.7235,1.2293,-2.2589;4.385,.422,-1.1854;2.7258,.8401,-3.6629;3.628,1.7422,-3.1302;1.3747,2.5869,-4.6084;1.5577,1.2449,-4.3744;.4955,2.9229,-5.1669;2.9249,-.4909,-3.4489;3.096,.0268,-1.0064;2.4012,-1.1126,-2.0123;.9295,-.9846,-1.8382;3.1045,-2.4372,-1.8641;-.1373,-3.6121,.67;-.0302,-5.2636,-4.7432;-.2548,-5.0051,-3.705;-.8423,-4.3107,-1.0845;.773,-4.5977,-2.8568;-1.5687,-5.0927,-3.2426;-1.863,-4.7404,-1.9278;.4916,-4.2655,-1.5301;1.8063,-4.5226,-3.2075;-2.3707,-5.4047,-3.9153;-2.8997,-4.7736,-1.5807;-1.0279,-3.8572,.2354;-2.1665,-3.6424,.8826;-3.0549,-4.1072,.4522;-2.1593,-3.5025,2.3491;-2.2137,-3.3099,5.1465;-3.3551,-3.7038,3.0544;-.9905,-3.2108,3.0686;-1.0152,-3.1153,4.457;-3.3813,-3.6095,4.4431;-4.2707,-3.9449,2.5081;-.0312,-3.0799,2.5622;-.0861,-2.9082,4.9942;-4.3184,-3.7787,4.9796;-2.2323,-3.2431,6.2378;1.416,-3.9015,-.6299;2.1753,-3.4026,-1.0871;.5198,.2384,-4.7168;-3.076,-1.7196,.0202;-2.8978,-.9649,1.1785;-1.8347,-.3141,1.5065;-.3632,.5642,1.2073;-.4387,1.4509,-.4261;.9925,-.6859,1.3984;-.3603,1.7681,2.6428;-3.8704,-.9513,2.0788;-3.6381,-.3324,3.3344;-.1962,.7539,-1.247;.3333,2.2434,-.4259;-1.4197,1.9305,-.5937;1.0174,-1.0466,2.4402;1.9657,-.2223,1.1621;.873,-1.5312,.7015;-.42,1.237,3.6093;.5745,2.358,2.6405;-1.2038,2.4788,2.5831;-2.7749,-.7873,3.8464;-4.5518,-.5032,3.9194;-3.4668,.7494,3.2092;4.8388,-.7214,.9886;4.4017,-2.0446,.8457;3.7515,-2.691,1.8896;3.5549,-2.0016,3.0824;4.0448,-.7144,3.2812;4.6952,-.0813,2.2269;4.4963,-2.5386,-.1236;3.3474,-3.6961,1.764;2.6969,-2.6003,4.1099;3.8725,-.2078,4.231;5.0476,.9474,2.346;-.7971,.4546,-4.2902;-1.775,-.5145,-4.4696;-1.4255,-1.7035,-5.0989;-.1397,-1.93,-5.5805;.8313,-.9573,-5.3783;-1.043,1.3753,-3.7547;-2.7936,-.3719,-4.1075;-2.4352,-2.7549,-5.2398;.092,-2.8679,-6.0852;1.8527,-1.1394,-5.7162;2.381,-1.9093,5.0593;2.31,-3.7376,3.9377;-2.2104,-3.6552,-6.0199;-3.437,-2.6726,-4.5574;7.0653,1.1636,-1.4834;6.1055,1.5527,-2.4625;8.4331,1.5016,-1.6757;8.8426,2.1739,-2.8008;9.1589,1.2045,-.9123;9.8984,2.4237,-2.9405;6.5656,2.2304,-3.6261;7.8958,2.5308,-3.7908;5.845,2.5022,-4.401;8.227,3.0452,-4.6971;3.3932,3.1463,-3.3202;2.278,3.5596,-4.1072;4.1961,4.1567,-2.7186;3.941,5.4901,-2.9345;5.0242,3.8669,-2.07;4.5747,6.2446,-2.4603;2.049,4.9462,-4.3249;2.8649,5.8947,-3.7595;1.1976,5.2448,-4.9445;2.6772,6.9585,-3.9305;-4.4751,-2.1972,-.2943;-4.4486,-2.9921,-1.0593;-5.0019,-2.5766,.5962;-5.0905,-1.378,-.7124;-2.1742,-1.4262,-1.1521;-2.308,-.386,-1.4997;-1.0968,-1.5566,-.9504;-2.4197,-2.0794,-2.0028;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650408972320</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001670080447 0.000374451032 0.017970561257 0.005329526479</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030715177 -0.000080776 0.000029231 0.000129300 0.000231143 0.000346793 0.000390392 0.000589078 0.000702982 0.000858884 0.001012948 0.001129053 0.001222716 0.001347474 0.001416686 0.001479473 0.001530470 0.001730318 0.001823351 0.001891378 0.002144418 0.002349667 0.002449439 0.002573757 0.002677470 0.003021039 0.003107493 0.003333521 0.003531400 0.003912307 0.004456305 0.004691908 0.004765859 0.005091914 0.006044213 0.006102129 0.006319879 0.006652551 0.006997126 0.007705604 0.008132528 0.008165917 0.008374318 0.009396215 0.009952863 0.010145862 0.010580305 0.011158447 0.011957676 0.012149034 0.013028908 0.013129496 0.014224054 0.014727191 0.015370619 0.015654303 0.015968481 0.016682548 0.016768931 0.017521789 0.018193709 0.018740494 0.019415763 0.019622309 0.020198173 0.020705039 0.021270560 0.021456648 0.022372033 0.023122770 0.024013405 0.026405861 0.026870812 0.027810388 0.028147854 0.029558337 0.030413544 0.031614983 0.033303125 0.033662359 0.034148428 0.035797361 0.037164450 0.037468689 0.039529214 0.040077616 0.040481115 0.040976479 0.042573300 0.044689824 0.045557604 0.047129684 0.048031793 0.049280276 0.050503736 0.051077423 0.051301750 0.051658264 0.052489343 0.052698895 0.052956305 0.053219653 0.054821629 0.054979675 0.056058670 0.056341912 0.056573909 0.056969615 0.057227227 0.059201370 0.060573033 0.061056750 0.061813241 0.062413587 0.063416053 0.064535980 0.065320112 0.066004733 0.066625403 0.068403256 0.069142679 0.070278660 0.072757729 0.074425145 0.074804597 0.076526178 0.078704563 0.084359203 0.086845935 0.087150758 0.087634444 0.089425646 0.090663125 0.091488385 0.094164741 0.094987608 0.095821905 0.096473436 0.097856278 0.098834971 0.100212357 0.100666197 0.101064659 0.102579062 0.103222379 0.103750401 0.104480853 0.104736903 0.106352085 0.107033326 0.108175822 0.109995380 0.111147278 0.112441541 0.113541041 0.115066960 0.116274548 0.116840397 0.118749661 0.121323720 0.122464653 0.123674557 0.125161467 0.126225994 0.126333527 0.126700763 0.127526125 0.132126163 0.135107761 0.135862156 0.142848936 0.143892750 0.147083297 0.147592534 0.149767780 0.152184891 0.154704947 0.155172245 0.156662985 0.161493476 0.161991269 0.173777948 0.174308800 0.181698735 0.185149254 0.186461225 0.189645575 0.190455475 0.194182532 0.195566821 0.198748332 0.200349926 0.205259407 0.207088826 0.207431887 0.210270173 0.216538259 0.217065307 0.217976694 0.219869327 0.220879948 0.225374210 0.226735136 0.232386325 0.235180943 0.235715670 0.236085820 0.244710991 0.256130253 0.257296885 0.263999115 0.269983448 0.280764065 0.283486312 0.286358241 0.291968435 0.297035922 0.304444773 0.305990588 0.307324955 0.314487775 0.316788355 0.317412867 0.322243114 0.330157264 0.332905496 0.351840989 0.352830416 0.355105112 0.355937156 0.360105259 0.363047091 0.364522957 0.384154391 0.386072452 0.392255038 0.410592957 0.426009519 0.431242758 0.462464025 0.469210108 0.479045886 0.484376864 0.484603195 0.487618889 0.491489264 0.509677861 0.515610375 0.535425696 0.569309502 0.575283837 0.591695440 0.594111364 0.607366451 0.608479697 0.644946972 0.647802581 0.649765014 0.674430466 0.678455384 0.686877789 0.692570310 0.693702399 0.700088301 0.704781362 0.718433059 0.742271624 0.751433189 0.759446558 0.771835560 0.774228322 0.779636507 0.811009602 0.816446392 0.820147782 0.823070040 0.823713298 0.832190350 0.835020090 0.837865042 0.842588779 0.845947965 0.847665853 0.850216999 0.859546915 0.865951337 0.868694675 0.874610495 0.886176310 0.887541646 0.889779511 0.900728740 0.901103763 0.904166640 0.924053067 0.928104798 0.936576489 0.937880463 0.966367156 0.976413832 0.987165662 1.001731771 1.020264347 1.028686051 1.042464661 1.051899397 1.058182688 1.068892927 1.086976550 1.088872216 1.104976304 1.108167886 1.112726047 1.127531867 1.136128171 1.141091867 1.145081331 1.176497738 1.179147582 1.181813268 1.187299258 1.191613491 1.198103004 1.224751848 1.228886423 1.274679684 1.302809999 1.321396434 1.328446673 1.333272803 1.336600369 1.338163646 1.342353363 1.343871756 1.345105776 1.359731984 1.379540930 1.383331479 1.385766554 1.410486752 1.420563732 1.431830563 1.551510639 1.685445445 1.776291084</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">287</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33910378" y3="0.03925209" z3="-0.1931068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38413403" y3="0.16049119" z3="0.41918959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64526895" y3="0.43441161" z3="-0.34011958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72691485" y3="1.22846463" z3="-2.26037994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3876194" y3="0.42305173" z3="-1.18557996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72715569" y3="0.84063155" z3="-3.66170455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63137809" y3="1.74214331" z3="-3.13126386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37809998" y3="2.58796081" z3="-4.60880357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55904671" y3="1.24624217" z3="-4.37299843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49866628" y3="2.92458234" z3="-5.1666327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92430543" y3="-0.49031356" z3="-3.44592971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09807964" y3="0.03140473" z3="-1.00464088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40153467" y3="-1.10909279" z3="-2.00770618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93000022" y3="-0.98010467" z3="-1.83258359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10463352" y3="-2.43359325" z3="-1.85821962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13764886" y3="-3.61609401" z3="0.67047245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02655979" y3="-5.25368827" z3="-4.74719824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25168983" y3="-4.99766665" z3="-3.70839135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84136289" y3="-4.30957182" z3="-1.08631963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77608563" y3="-4.59314031" z3="-2.85838551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56698312" y3="-5.08473789" z3="-3.24705896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86262941" y3="-4.73558827" z3="-1.93178818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49317625" y3="-4.2638828" z3="-1.53123535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8075457" y3="-4.51281037" z3="-3.20757545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36821284" y3="-5.39588781" z3="-3.92075448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89775412" y3="-4.77328032" z3="-1.58590729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02710494" y3="-3.86042934" z3="0.23471982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16629149" y3="-3.64650928" z3="0.8818624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05439965" y3="-4.11202499" z3="0.45174556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.15808901" y3="-3.50842936" z3="2.34875491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21156925" y3="-3.31861751" z3="5.14641765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35215882" y3="-3.71577151" z3="3.05484583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99056385" y3="-3.21165429" z3="3.06760467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01458407" y3="-3.11776165" z3="4.45618247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37810559" y3="-3.62291885" z3="4.44356797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26777879" y3="-3.95914582" z3="2.50867129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0327433" y3="-3.07476773" z3="2.56068562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08482074" y3="-2.90832196" z3="4.9932811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31501761" y3="-3.79517305" z3="4.98086672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.22968577" y3="-3.25307041" z3="6.23789111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41652863" y3="-3.90138979" z3="-0.62965951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17562924" y3="-3.40072708" z3="-1.08485871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5196801" y3="0.24136968" z3="-4.71406346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07898181" y3="-1.72481366" z3="0.02219205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90089914" y3="-0.97093597" z3="1.18165719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83859738" y3="-0.31920685" z3="1.50966496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37042912" y3="0.56502624" z3="1.20961183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44865548" y3="1.44979904" z3="-0.42485405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98910572" y3="-0.68099871" z3="1.40320421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37333638" y3="1.77144617" z3="2.64296801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8729265" y3="-0.96016273" z3="2.08253324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64124985" y3="-0.34351606" z3="3.33913877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20046983" y3="0.7543087" z3="-1.24499231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31785102" y3="2.24729273" z3="-0.42348308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43239464" y3="1.92269304" z3="-0.59406996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01485316" y3="-1.0408588" z3="2.44536614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96070959" y3="-0.2147905" z3="1.16679716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.87104806" y3="-1.52699989" z3="0.7064736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42961795" y3="1.24178046" z3="3.61041637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55802131" y3="2.36668406" z3="2.63913479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22091354" y3="2.47715293" z3="2.58198045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77731934" y3="-0.79814457" z3="3.8498888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5542094" y3="-0.51720481" z3="3.92394669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47192397" y3="0.73870749" z3="3.21614564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83998127" y3="-0.71744843" z3="0.98968757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40282725" y3="-2.04067695" z3="0.84979363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75119376" y3="-2.68449225" z3="1.89432287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55379982" y3="-1.99219926" z3="3.08553984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.04380863" y3="-0.70446377" z3="3.28188697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69515642" y3="-0.07424788" z3="2.22622082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5004058" y3="-2.53740538" z3="-0.11655646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34675406" y3="-3.68996564" z3="1.77022872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69373428" y3="-2.58831676" z3="4.11262224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.87161116" y3="-0.19574505" z3="4.23133353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0470871" y3="0.95443796" z3="2.34270156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79688697" y3="0.45838665" z3="-4.28604372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77600952" y3="-0.50957378" z3="-4.46729259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42791597" y3="-1.69824755" z3="-5.09805575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14202737" y3="-1.92531796" z3="-5.57853063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82983602" y3="-0.95415399" z3="-5.37654609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04175348" y3="1.3788652" z3="-3.75008247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.794285" y3="-0.36634389" z3="-4.10494388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43908897" y3="-2.74813938" z3="-5.24037953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08843669" y3="-2.86304233" z3="-6.08429964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85119319" y3="-1.13682221" z3="-5.71450217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36672094" y3="-1.89130397" z3="5.05304864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31563295" y3="-3.72961051" z3="3.94807054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2136274" y3="-3.6503322" z3="-6.01844643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4429827" y3="-2.66280566" z3="-4.56117829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06952214" y3="1.15946333" z3="-1.48670207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10934742" y3="1.548608" z3="-2.46567065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43762541" y3="1.4927743" z3="-1.68123204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84767776" y3="2.16377667" z3="-2.80730338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16331768" y3="1.19418646" z3="-0.91841176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90363678" y3="2.40971745" z3="-2.94872894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56965205" y3="2.22329712" z3="-3.63060723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90088721" y3="2.52279059" z3="-3.79644098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84898379" y3="2.49635732" z3="-4.40491941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.232398" y3="3.03616359" z3="-4.70357238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39865149" y3="3.14651292" z3="-3.32274841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2830392" y3="3.56078977" z3="-4.10864493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20449443" y3="4.15604598" z3="-2.72428018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95192561" y3="5.48952749" z3="-2.94239373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03295808" y3="3.86564433" z3="-2.07628553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58704848" y3="6.24424895" z3="-2.46944557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05633096" y3="4.94748096" z3="-4.32846755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87533322" y3="5.89498437" z3="-3.76646941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20486647" y3="5.24649023" z3="-4.947681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68993221" y3="6.95868081" z3="-3.93966401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47794893" y3="-2.20392267" z3="-0.29184594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44994649" y3="-2.99725825" z3="-1.05788891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00362522" y3="-2.5854389" z3="0.59825598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09440526" y3="-1.38501091" z3="-0.70880051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17837652" y3="-1.4289725" z3="-1.15089944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31368878" y3="-0.38732314" z3="-1.49632526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10208812" y3="-1.55572034" z3="-0.94864847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42298529" y3="-2.08136116" z3="-2.00243103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0393,-.1931;7.3841,.1605,.4192;6.6453,.4344,-.3401;4.7269,1.2285,-2.2604;4.3876,.4231,-1.1856;2.7272,.8406,-3.6617;3.6314,1.7421,-3.1313;1.3781,2.588,-4.6088;1.559,1.2462,-4.373;.4987,2.9246,-5.1666;2.9243,-.4903,-3.4459;3.0981,.0314,-1.0046;2.4015,-1.1091,-2.0077;.93,-.9801,-1.8326;3.1046,-2.4336,-1.8582;-.1376,-3.6161,.6705;-.0266,-5.2537,-4.7472;-.2517,-4.9977,-3.7084;-.8414,-4.3096,-1.0863;.7761,-4.5931,-2.8584;-1.567,-5.0847,-3.2471;-1.8626,-4.7356,-1.9318;.4932,-4.2639,-1.5312;1.8075,-4.5128,-3.2076;-2.3682,-5.3959,-3.9208;-2.8978,-4.7733,-1.5859;-1.0271,-3.8604,.2347;-2.1663,-3.6465,.8819;-3.0544,-4.112,.4517;-2.1581,-3.5084,2.3488;-2.2116,-3.3186,5.1464;-3.3522,-3.7158,3.0548;-.9906,-3.2117,3.0676;-1.0146,-3.1178,4.4562;-3.3781,-3.6229,4.4436;-4.2678,-3.9591,2.5087;-.0327,-3.0748,2.5607;-.0848,-2.9083,4.9933;-4.315,-3.7952,4.9809;-2.2297,-3.2531,6.2379;1.4165,-3.9014,-.6297;2.1756,-3.4007,-1.0849;.5197,.2414,-4.7141;-3.079,-1.7248,.0222;-2.9009,-.9709,1.1817;-1.8386,-.3192,1.5097;-.3704,.565,1.2096;-.4487,1.4498,-.4249;.9891,-.681,1.4032;-.3733,1.7714,2.643;-3.8729,-.9602,2.0825;-3.6412,-.3435,3.3391;-.2005,.7543,-1.245;.3179,2.2473,-.4235;-1.4324,1.9227,-.5941;1.0149,-1.0409,2.4454;1.9607,-.2148,1.1668;.871,-1.527,.7065;-.4296,1.2418,3.6104;.558,2.3667,2.6391;-1.2209,2.4772,2.582;-2.7773,-.7981,3.8499;-4.5542,-.5172,3.9239;-3.4719,.7387,3.2161;4.84,-.7174,.9897;4.4028,-2.0407,.8498;3.7512,-2.6845,1.8943;3.5538,-1.9922,3.0855;4.0438,-.7045,3.2819;4.6952,-.0742,2.2262;4.5004,-2.5374,-.1166;3.3468,-3.69,1.7702;2.6937,-2.5883,4.1126;3.8716,-.1957,4.2313;5.0471,.9544,2.3427;-.7969,.4584,-4.286;-1.776,-.5096,-4.4673;-1.4279,-1.6982,-5.0981;-.142,-1.9253,-5.5785;.8298,-.9542,-5.3765;-1.0418,1.3789,-3.7501;-2.7943,-.3663,-4.1049;-2.4391,-2.7481,-5.2404;.0884,-2.863,-6.0843;1.8512,-1.1368,-5.7145;2.3667,-1.8913,5.053;2.3156,-3.7296,3.9481;-2.2136,-3.6503,-6.0184;-3.443,-2.6628,-4.5612;7.0695,1.1595,-1.4867;6.1093,1.5486,-2.4657;8.4376,1.4928,-1.6812;8.8477,2.1638,-2.8073;9.1633,1.1942,-.9184;9.9036,2.4097,-2.9487;6.5697,2.2233,-3.6306;7.9009,2.5228,-3.7964;5.849,2.4964,-4.4049;8.2324,3.0362,-4.7036;3.3987,3.1465,-3.3227;2.283,3.5608,-4.1086;4.2045,4.156,-2.7243;3.9519,5.4895,-2.9424;5.033,3.8656,-2.0763;4.587,6.2442,-2.4694;2.0563,4.9475,-4.3285;2.8753,5.895,-3.7665;1.2049,5.2465,-4.9477;2.6899,6.9587,-3.9397;-4.4779,-2.2039,-.2918;-4.4499,-2.9973,-1.0579;-5.0036,-2.5854,.5983;-5.0944,-1.385,-.7088;-2.1784,-1.429,-1.1509;-2.3137,-.3873,-1.4963;-1.1021,-1.5557,-.9486;-2.423,-2.0814,-2.0024;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418799360</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000907431071 0.000186559822 0.016520747637 0.005331212093</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030715401 -0.000439791 0.000051545 0.000194483 0.000234264 0.000346715 0.000390849 0.000588005 0.000702742 0.000859169 0.001008194 0.001139201 0.001222481 0.001345907 0.001414846 0.001479631 0.001528447 0.001731870 0.001823568 0.001896157 0.002145729 0.002351466 0.002456560 0.002572558 0.002676674 0.003023683 0.003106983 0.003333463 0.003532879 0.003911838 0.004456737 0.004691499 0.004765891 0.005094338 0.006046364 0.006101562 0.006320729 0.006655204 0.006999234 0.007705988 0.008132563 0.008176206 0.008383290 0.009396318 0.009952976 0.010146774 0.010586222 0.011159377 0.011958411 0.012150958 0.013029217 0.013131069 0.014230957 0.014731670 0.015373608 0.015660614 0.015970112 0.016711184 0.016768398 0.017523839 0.018196661 0.018744801 0.019415637 0.019622498 0.020198582 0.020706590 0.021272963 0.021456928 0.022372155 0.023122956 0.024016241 0.026409405 0.026870897 0.027810580 0.028159394 0.029558934 0.030418981 0.031615377 0.033305684 0.033662548 0.034151670 0.035797215 0.037164506 0.037469687 0.039529793 0.040079084 0.040482830 0.040982868 0.042573276 0.044690888 0.045559700 0.047131114 0.048034609 0.049280175 0.050504228 0.051077500 0.051302207 0.051662414 0.052489385 0.052698995 0.052957065 0.053221849 0.054824059 0.054979645 0.056058686 0.056346324 0.056574046 0.056974880 0.057227250 0.059201565 0.060573850 0.061057435 0.061819116 0.062413655 0.063416019 0.064536015 0.065320155 0.066005408 0.066625592 0.068404340 0.069143739 0.070279483 0.072757745 0.074425104 0.074804574 0.076526723 0.078710130 0.084365357 0.086857726 0.087151068 0.087634789 0.089438933 0.090663388 0.091488563 0.094176411 0.094988847 0.095827395 0.096476135 0.097856575 0.098835329 0.100213520 0.100707770 0.101113503 0.102589107 0.103223494 0.103758630 0.104480830 0.104762495 0.106353331 0.107034232 0.108176732 0.110007831 0.111157524 0.112445039 0.113544328 0.115070524 0.116274612 0.116841144 0.118753880 0.121329822 0.122464596 0.123710893 0.125181498 0.126226411 0.126333643 0.126709629 0.127538982 0.132126426 0.135108377 0.135865065 0.142849190 0.143892778 0.147084870 0.147592788 0.149771296 0.152186919 0.154705593 0.155173762 0.156666934 0.161493751 0.161991433 0.173777926 0.174309254 0.181726574 0.185182901 0.186462918 0.189645811 0.190455412 0.194190120 0.195576006 0.198757653 0.200350868 0.205268340 0.207099828 0.207435195 0.210273980 0.216538489 0.217065555 0.217976834 0.219885984 0.220887320 0.225383269 0.226736054 0.232386837 0.235181068 0.235715678 0.236086637 0.244716177 0.256130369 0.257296960 0.263999627 0.269984555 0.280764003 0.283489534 0.286358594 0.291974180 0.297039988 0.304452733 0.305991332 0.307325368 0.314487942 0.316791670 0.317412868 0.322243077 0.330159455 0.332908702 0.351842339 0.352837400 0.355105248 0.355939467 0.360105496 0.363048056 0.364522399 0.384156551 0.386074370 0.392255424 0.410593814 0.426013735 0.431243099 0.462464487 0.469214710 0.479047240 0.484381454 0.484608538 0.487619891 0.491492392 0.509678232 0.515610513 0.535425920 0.569311057 0.575290494 0.591699142 0.594124956 0.607366664 0.608479742 0.644954432 0.647818020 0.649765090 0.674430444 0.678455576 0.686914577 0.692615720 0.693702990 0.700110759 0.704782764 0.718445692 0.742271626 0.751433194 0.759447304 0.771879171 0.774258447 0.779637437 0.811011352 0.816447608 0.820154626 0.823086811 0.823713292 0.832212678 0.835020214 0.837865821 0.842590836 0.845949213 0.847665919 0.850220809 0.859554942 0.865951394 0.868717731 0.874631969 0.886176374 0.887568234 0.889779523 0.900759177 0.901109826 0.904166729 0.924069942 0.928108723 0.936576477 0.937880928 0.966373554 0.976414029 0.987184613 1.001732984 1.020264345 1.028686531 1.042483320 1.051931267 1.058205259 1.068893511 1.086979932 1.088872289 1.104992915 1.108207590 1.112743667 1.127542912 1.136150755 1.141117072 1.145104401 1.176500178 1.179151815 1.181813584 1.187313641 1.191618353 1.198128735 1.224753122 1.228889071 1.274713276 1.302810848 1.321396468 1.328450130 1.333278782 1.336601219 1.338173692 1.342354578 1.343916469 1.345112362 1.359756418 1.379542787 1.383332896 1.385767110 1.410495339 1.420564438 1.431830883 1.551510722 1.685502116 1.776294960</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">288</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3419715" y3="0.04481376" z3="-0.1920727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38814849" y3="0.16132095" z3="0.41643704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64851668" y3="0.43511398" z3="-0.34229608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72928735" y3="1.23090995" z3="-2.26092138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38978661" y3="0.42859839" z3="-1.18391086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72833506" y3="0.84233229" z3="-3.65994033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63394934" y3="1.74399749" z3="-3.13234171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38039154" y3="2.58918349" z3="-4.6097667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56023406" y3="1.24758583" z3="-4.37118119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50124324" y3="2.92522087" z3="-5.16830178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9242108" y3="-0.48833019" z3="-3.44150146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09970971" y3="0.03832758" z3="-1.00113556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40248506" y3="-1.10433932" z3="-2.0016311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93103509" y3="-0.97544933" z3="-1.8259597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10587576" y3="-2.42854515" z3="-1.85040596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.139807" y3="-3.61267534" z3="0.6696171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01665599" y3="-5.25039379" z3="-4.74688912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24423494" y3="-4.99438138" z3="-3.70857593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83950267" y3="-4.30687834" z3="-1.08800923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78123644" y3="-4.58844807" z3="-2.85669018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55950124" y3="-5.08397186" z3="-3.24997465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85783225" y3="-4.73485388" z3="-1.935174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49580051" y3="-4.25980628" z3="-1.52991798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81488261" y3="-4.51078303" z3="-3.20428073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35941534" y3="-5.39548603" z3="-3.92536075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89502491" y3="-4.77032512" z3="-1.59126959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02829665" y3="-3.85813142" z3="0.2328318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16821369" y3="-3.64817156" z3="0.87913397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05470473" y3="-4.11378854" z3="0.44649594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16214344" y3="-3.51318509" z3="2.34609804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21746572" y3="-3.33120691" z3="5.14419302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35656469" y3="-3.72409471" z3="3.05060886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99531924" y3="-3.21653961" z3="3.06663055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02033406" y3="-3.12630394" z3="4.45537099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38338673" y3="-3.63524471" z3="4.43961549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27089426" y3="-3.96828101" z3="2.50319861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03735193" y3="-3.07667423" z3="2.56072913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09209873" y3="-2.91502713" z3="4.99328792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31973681" y3="-3.81169379" z3="4.97562382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23637457" y3="-3.26866512" z3="6.23581305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41716506" y3="-3.89777878" z3="-0.62599792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17698555" y3="-3.39583673" z3="-1.07916832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51989346" y3="0.24260217" z3="-4.71037154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08236525" y3="-1.72437274" z3="0.02310218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90444452" y3="-0.9734349" z3="1.18413616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84204348" y3="-0.32245177" z3="1.51395694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37435207" y3="0.56255103" z3="1.21548723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45350359" y3="1.45118933" z3="-0.41671853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98596821" y3="-0.682614" z3="1.40469985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37615521" y3="1.76479453" z3="2.65207642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87647833" y3="-0.9649983" z3="2.08508242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64443466" y3="-0.35171139" z3="3.34336917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20664983" y3="0.75719123" z3="-1.23850508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31434221" y3="2.24750601" z3="-0.41476064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43660494" y3="1.92604276" z3="-0.5838179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01444184" y3="-1.04193722" z3="2.44664993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95722554" y3="-0.21657202" z3="1.16588532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86710645" y3="-1.52858625" z3="0.70854566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43012424" y3="1.23208328" z3="3.6180689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5542305" y3="2.36140815" z3="2.64856769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2249209" y3="2.46943152" z3="2.59454416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78089785" y3="-0.80818694" z3="3.85305453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55771649" y3="-0.52610616" z3="3.92782424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47411989" y3="0.73076922" z3="3.22324369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84245049" y3="-0.71080943" z3="0.99155788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41032869" y3="-2.03597535" z3="0.8532699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75739731" y3="-2.67939851" z3="1.89730488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55259871" y3="-1.98458934" z3="3.08556881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03697752" y3="-0.69457816" z3="3.28021342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69057231" y3="-0.06486404" z3="2.22573415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51010727" y3="-2.53390233" z3="-0.11355803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35690911" y3="-3.68648339" z3="1.77454514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69087706" y3="-2.58078628" z3="4.11130342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85742158" y3="-0.18337526" z3="4.22614859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0384245" y3="0.96546875" z3="2.3408541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79673548" y3="0.46241526" z3="-4.28443448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77705594" y3="-0.50435709" z3="-4.46388448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43028073" y3="-1.69467397" z3="-5.09211113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14448701" y3="-1.92488866" z3="-5.57176679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82891522" y3="-0.95484557" z3="-5.36986908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04079644" y3="1.3845377" z3="-3.75065862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79542538" y3="-0.35879588" z3="-4.10272065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44295075" y3="-2.74285055" z3="-5.23399278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0851729" y3="-2.86395199" z3="-6.07539619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85020615" y3="-1.14007538" z3="-5.70649889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35908734" y3="-1.88240466" z3="5.05029852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31765657" y3="-3.72379146" z3="3.94835132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22006385" y3="-3.6440475" z3="-6.01380584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44537221" y3="-2.65734183" z3="-4.55273811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07273897" y3="1.15773368" z3="-1.49071529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11207915" y3="1.54758522" z3="-2.46884182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44159236" y3="1.48836752" z3="-1.68793675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85134715" y3="2.15484788" z3="-2.81646237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16796067" y3="1.19040354" z3="-0.92544241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90788662" y3="2.39888393" z3="-2.95988316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57223128" y3="2.21856881" z3="-3.6361044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90359258" y3="2.51273647" z3="-3.80520053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85087004" y3="2.49084056" z3="-4.41010586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23482842" y3="3.02209821" z3="-4.71436579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40306001" y3="3.14801672" z3="-3.32763571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28740117" y3="3.56145868" z3="-4.11386599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21087762" y3="4.15831514" z3="-2.73275104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95996315" y3="5.49158637" z3="-2.95437112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03975135" y3="3.86856898" z3="-2.0850059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59729153" y3="6.24623402" z3="-2.48526099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0625641" y3="4.94775274" z3="-4.33752065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88315601" y3="5.89608172" z3="-3.7785532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2109075" y3="5.24625261" z3="-4.95664845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69879924" y3="6.95969383" z3="-3.9543119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48084039" y3="-2.20384664" z3="-0.29176701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45297203" y3="-2.99577261" z3="-1.05962606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00582808" y3="-2.58749129" z3="0.59785774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09836785" y3="-1.38466901" z3="-0.70672984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18188758" y3="-1.42600641" z3="-1.14905226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31892465" y3="-0.38482004" z3="-1.49418441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10453919" y3="-1.55292675" z3="-0.94725465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42559861" y3="-2.07817424" z3="-2.00114573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.342,.0448,-.1921;7.3881,.1613,.4164;6.6485,.4351,-.3423;4.7293,1.2309,-2.2609;4.3898,.4286,-1.1839;2.7283,.8423,-3.6599;3.6339,1.744,-3.1323;1.3804,2.5892,-4.6098;1.5602,1.2476,-4.3712;.5012,2.9252,-5.1683;2.9242,-.4883,-3.4415;3.0997,.0383,-1.0011;2.4025,-1.1043,-2.0016;.931,-.9754,-1.826;3.1059,-2.4285,-1.8504;-.1398,-3.6127,.6696;-.0167,-5.2504,-4.7469;-.2442,-4.9944,-3.7086;-.8395,-4.3069,-1.088;.7812,-4.5884,-2.8567;-1.5595,-5.084,-3.25;-1.8578,-4.7349,-1.9352;.4958,-4.2598,-1.5299;1.8149,-4.5108,-3.2043;-2.3594,-5.3955,-3.9254;-2.895,-4.7703,-1.5913;-1.0283,-3.8581,.2328;-2.1682,-3.6482,.8791;-3.0547,-4.1138,.4465;-2.1621,-3.5132,2.3461;-2.2175,-3.3312,5.1442;-3.3566,-3.7241,3.0506;-.9953,-3.2165,3.0666;-1.0203,-3.1263,4.4554;-3.3834,-3.6352,4.4396;-4.2709,-3.9683,2.5032;-.0374,-3.0767,2.5607;-.0921,-2.915,4.9933;-4.3197,-3.8117,4.9756;-2.2364,-3.2687,6.2358;1.4172,-3.8978,-.626;2.177,-3.3958,-1.0792;.5199,.2426,-4.7104;-3.0824,-1.7244,.0231;-2.9044,-.9734,1.1841;-1.842,-.3225,1.514;-.3744,.5626,1.2155;-.4535,1.4512,-.4167;.986,-.6826,1.4047;-.3762,1.7648,2.6521;-3.8765,-.965,2.0851;-3.6444,-.3517,3.3434;-.2066,.7572,-1.2385;.3143,2.2475,-.4148;-1.4366,1.926,-.5838;1.0144,-1.0419,2.4466;1.9572,-.2166,1.1659;.8671,-1.5286,.7085;-.4301,1.2321,3.6181;.5542,2.3614,2.6486;-1.2249,2.4694,2.5945;-2.7809,-.8082,3.8531;-4.5577,-.5261,3.9278;-3.4741,.7308,3.2232;4.8425,-.7108,.9916;4.4103,-2.036,.8533;3.7574,-2.6794,1.8973;3.5526,-1.9846,3.0856;4.037,-.6946,3.2802;4.6906,-.0649,2.2257;4.5101,-2.5339,-.1136;3.3569,-3.6865,1.7745;2.6909,-2.5808,4.1113;3.8574,-.1834,4.2261;5.0384,.9655,2.3409;-.7967,.4624,-4.2844;-1.7771,-.5044,-4.4639;-1.4303,-1.6947,-5.0921;-.1445,-1.9249,-5.5718;.8289,-.9548,-5.3699;-1.0408,1.3845,-3.7507;-2.7954,-.3588,-4.1027;-2.443,-2.7429,-5.234;.0852,-2.864,-6.0754;1.8502,-1.1401,-5.7065;2.3591,-1.8824,5.0503;2.3177,-3.7238,3.9484;-2.2201,-3.644,-6.0138;-3.4454,-2.6573,-4.5527;7.0727,1.1577,-1.4907;6.1121,1.5476,-2.4688;8.4416,1.4884,-1.6879;8.8513,2.1548,-2.8165;9.168,1.1904,-.9254;9.9079,2.3989,-2.9599;6.5722,2.2186,-3.6361;7.9036,2.5127,-3.8052;5.8509,2.4908,-4.4101;8.2348,3.0221,-4.7144;3.4031,3.148,-3.3276;2.2874,3.5615,-4.1139;4.2109,4.1583,-2.7328;3.96,5.4916,-2.9544;5.0398,3.8686,-2.085;4.5973,6.2462,-2.4853;2.0626,4.9478,-4.3375;2.8832,5.8961,-3.7786;1.2109,5.2463,-4.9566;2.6988,6.9597,-3.9543;-4.4808,-2.2038,-.2918;-4.453,-2.9958,-1.0596;-5.0058,-2.5875,.5979;-5.0984,-1.3847,-.7067;-2.1819,-1.426,-1.1491;-2.3189,-.3848,-1.4942;-1.1045,-1.5529,-.9473;-2.4256,-2.0782,-2.0011;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421888889</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001370171947 0.000242812037 0.019919990714 0.005331279760</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030716276 -0.000144438 0.000071975 0.000158531 0.000216655 0.000338007 0.000385380 0.000590475 0.000697578 0.000849192 0.000984152 0.001084603 0.001218907 0.001339750 0.001413960 0.001475470 0.001531211 0.001732151 0.001822956 0.001900707 0.002130797 0.002351014 0.002432346 0.002544101 0.002675819 0.003030246 0.003080171 0.003262140 0.003535018 0.003881752 0.004455638 0.004687153 0.004764622 0.005101570 0.006026771 0.006085163 0.006319057 0.006657415 0.006972123 0.007688431 0.008120876 0.008168373 0.008408002 0.009401474 0.009937474 0.010107191 0.010428527 0.011156709 0.011936485 0.012150044 0.013006258 0.013116357 0.014229740 0.014740570 0.015371108 0.015669344 0.015970158 0.016695156 0.016742406 0.017517239 0.018199200 0.018745383 0.019404223 0.019621770 0.020192556 0.020709584 0.021254446 0.021432364 0.022329909 0.023116847 0.023932360 0.026398913 0.026870765 0.027810566 0.028167963 0.029560337 0.030428866 0.031612454 0.033302951 0.033659729 0.034141485 0.035791531 0.037161932 0.037446185 0.039521851 0.040077876 0.040443337 0.040966963 0.042570559 0.044688619 0.045557510 0.047131254 0.048033890 0.049280073 0.050507220 0.051076615 0.051302257 0.051664355 0.052489538 0.052698728 0.052957095 0.053221146 0.054828145 0.054980411 0.056058757 0.056349599 0.056574714 0.056983631 0.057227265 0.059202417 0.060577239 0.061058614 0.061822429 0.062412869 0.063413060 0.064534126 0.065316950 0.066003529 0.066617361 0.068404605 0.069143288 0.070279069 0.072756541 0.074422281 0.074804692 0.076524183 0.078720129 0.084372790 0.086881136 0.087151293 0.087627079 0.089458041 0.090662349 0.091488224 0.094190654 0.094989529 0.095839412 0.096479524 0.097857583 0.098835624 0.100216621 0.100738619 0.101168041 0.102598848 0.103223682 0.103764985 0.104476490 0.104792603 0.106349238 0.107034347 0.108178470 0.110013473 0.111162270 0.112443244 0.113539363 0.115071937 0.116274752 0.116835414 0.118755130 0.121337622 0.122465875 0.123731175 0.125177141 0.126225257 0.126334733 0.126722087 0.127555255 0.132124679 0.135109194 0.135868711 0.142851141 0.143891137 0.147089587 0.147592728 0.149764903 0.152108589 0.154701170 0.155140389 0.156665921 0.161419691 0.161992925 0.173772019 0.174309719 0.181759383 0.185192791 0.186468813 0.189643900 0.190452096 0.194202489 0.195588391 0.198775051 0.200350818 0.205257990 0.207109209 0.207435550 0.210275855 0.216536348 0.217064546 0.217965968 0.219907771 0.220887461 0.225389469 0.226737480 0.232387221 0.235181832 0.235714878 0.236087194 0.244724344 0.256129809 0.257297372 0.263999468 0.269983565 0.280764222 0.283491122 0.286359210 0.291978708 0.297036031 0.304460569 0.305992829 0.307314582 0.314486163 0.316794016 0.317410950 0.322241095 0.330150149 0.332911223 0.351837998 0.352861768 0.355097200 0.355939784 0.360097263 0.363047935 0.364524362 0.384125598 0.386080973 0.392243347 0.410586504 0.426017680 0.431240545 0.462464113 0.469197084 0.479048951 0.484397063 0.484611527 0.487591661 0.491492253 0.509678360 0.515583474 0.535398317 0.569307073 0.575289938 0.591638090 0.594140670 0.607356948 0.608469857 0.644955261 0.647839905 0.649762922 0.674427366 0.678453124 0.686961523 0.692657378 0.693701463 0.700122476 0.704783745 0.718465527 0.742271455 0.751433331 0.759448965 0.771909738 0.774284872 0.779642176 0.811009802 0.816442318 0.820151336 0.823094870 0.823711300 0.832216978 0.835019649 0.837866687 0.842593724 0.845951157 0.847666553 0.850221661 0.859557330 0.865951319 0.868735682 0.874646313 0.886176663 0.887588571 0.889780251 0.900789791 0.901112652 0.904166352 0.924084357 0.928110923 0.936576584 0.937881193 0.966372938 0.976414623 0.987205315 1.001735632 1.020259959 1.028690177 1.042501415 1.051945469 1.058215824 1.068886152 1.086979924 1.088870893 1.105019154 1.108270460 1.112757801 1.127551805 1.136171732 1.141125555 1.145117973 1.176502924 1.179152013 1.181812011 1.187320530 1.191623324 1.198144129 1.224752818 1.228890063 1.274678391 1.302802325 1.321395638 1.328437622 1.333277126 1.336600934 1.338089748 1.342213566 1.343901608 1.345115487 1.359756605 1.379547803 1.383332384 1.385766902 1.410133812 1.420568067 1.431714953 1.551509544 1.685524281 1.776261039</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">289</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34160935" y3="0.05085336" z3="-0.19123883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38853363" y3="0.16512703" z3="0.41613792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64911379" y3="0.43968582" z3="-0.34238154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73019845" y3="1.23420074" z3="-2.26207334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3897486" y3="0.43477488" z3="-1.183198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72890752" y3="0.8443853" z3="-3.65993655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63548669" y3="1.74649018" z3="-3.13476204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38327412" y3="2.58955745" z3="-4.61525995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56124812" y3="1.24883127" z3="-4.3724271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50422045" y3="2.92542589" z3="-5.17405646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92356578" y3="-0.48580701" z3="-3.43793739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09929701" y3="0.04714578" z3="-0.99918452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40124205" y3="-1.09752962" z3="-1.99655307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92987367" y3="-0.96727941" z3="-1.82155701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10426035" y3="-2.4215737" z3="-1.84217422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14095929" y3="-3.61675695" z3="0.67039087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00709793" y3="-5.25120646" z3="-4.74679119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23711897" y3="-4.99425907" z3="-3.70921214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83900526" y3="-4.30570131" z3="-1.09010718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78653962" y3="-4.58727442" z3="-2.8553241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55436667" y3="-5.08292088" z3="-3.2534021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85630701" y3="-4.73313513" z3="-1.93965577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49745511" y3="-4.25785948" z3="-1.52949234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81926603" y3="-4.50545624" z3="-3.20016497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35211552" y3="-5.39642873" z3="-3.93006633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89284376" y3="-4.77234095" z3="-1.5981145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02964826" y3="-3.85919284" z3="0.23112263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1702588" y3="-3.64979598" z3="0.87681948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05745" y3="-4.11327486" z3="0.44234388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1649006" y3="-3.51786488" z3="2.34414381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22287714" y3="-3.34059965" z3="5.14239984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35977955" y3="-3.73023057" z3="3.04735027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99882995" y3="-3.22249761" z3="3.06606396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02521388" y3="-3.13437966" z3="4.45490242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38779636" y3="-3.64400134" z3="4.43644332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27410391" y3="-3.97274015" z3="2.49865909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04027454" y3="-3.08216526" z3="2.56134706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09660336" y3="-2.92478058" z3="4.99385467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32495177" y3="-3.82100676" z3="4.97149379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24284943" y3="-3.27996037" z3="6.23410311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41617249" y3="-3.89437417" z3="-0.62379195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17589106" y3="-3.39018606" z3="-1.07480149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51993002" y3="0.24421266" z3="-4.70860135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08369355" y3="-1.72359826" z3="0.02411984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90667687" y3="-0.97509102" z3="1.18692905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84485628" y3="-0.3243814" z3="1.51914297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37567854" y3="0.55854198" z3="1.22195118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45617141" y3="1.45483075" z3="-0.40604736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9827288" y3="-0.69012411" z3="1.40502913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37306519" y3="1.75444288" z3="2.66393222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87947447" y3="-0.96868659" z3="2.08715068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64852418" y3="-0.35847534" z3="3.34710647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21305347" y3="0.76455256" z3="-1.23194731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31406452" y3="2.24867739" z3="-0.4012963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4381923" y3="1.93317446" z3="-0.56882041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0113621" y3="-1.05309217" z3="2.44609417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95413551" y3="-0.22413982" z3="1.166986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86144372" y3="-1.5336837" z3="0.70613367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4258912" y3="1.21736637" z3="3.6275135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55847762" y3="2.34924504" z3="2.66120602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2206504" y3="2.46072225" z3="2.61163825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78508993" y3="-0.81592455" z3="3.85621515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56200489" y3="-0.53483203" z3="3.9304071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47877982" y3="0.72427651" z3="3.22980789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84132481" y3="-0.70338749" z3="0.99287319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4148974" y3="-2.0304354" z3="0.85627378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76156494" y3="-2.6743071" z3="1.89974854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55173319" y3="-1.97814483" z3="3.08663613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03085787" y3="-0.68585964" z3="3.28009125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68395064" y3="-0.05553761" z3="2.22557042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52173591" y3="-2.53066213" z3="-0.1071859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36516502" y3="-3.68316186" z3="1.77778618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6885164" y3="-2.57546607" z3="4.11046512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84855749" y3="-0.17392043" z3="4.22604165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02770341" y3="0.97626441" z3="2.3397392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79661349" y3="0.46660454" z3="-4.2830395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77799945" y3="-0.49972984" z3="-4.46084628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43220464" y3="-1.69188417" z3="-5.08645678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14623553" y3="-1.92472596" z3="-5.56420397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82804215" y3="-0.95545895" z3="-5.36468197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03975586" y3="1.39044665" z3="-3.75184276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79641702" y3="-0.35214295" z3="-4.10035113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44589994" y3="-2.73944892" z3="-5.22719278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0822289" y3="-2.86535126" z3="-6.06542327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84949412" y3="-1.14276864" z3="-5.70013722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35260289" y3="-1.87751406" z3="5.04692411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31629288" y3="-3.71887425" z3="3.94654014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22515848" y3="-3.63978213" z3="-6.00855083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44695052" y3="-2.65413626" z3="-4.54371083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07401535" y3="1.15854983" z3="-1.49271141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11350019" y3="1.54777763" z3="-2.47128997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4432528" y3="1.4843572" z3="-1.69206423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85395387" y3="2.14761453" z3="-2.82248136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16935866" y3="1.185925" z3="-0.92958975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91075258" y3="2.38711067" z3="-2.96782288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57435768" y3="2.21486494" z3="-3.64046126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90665548" y3="2.50662484" z3="-3.81108582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85331297" y3="2.48775493" z3="-4.41442717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23855903" y3="3.01388571" z3="-4.72161395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40648764" y3="3.15024496" z3="-3.33430985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29121362" y3="3.56284462" z3="-4.12151515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21602675" y3="4.16117729" z3="-2.74309123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96728767" y3="5.49395303" z3="-2.96943056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0444739" y3="3.87246738" z3="-2.09437139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60536235" y3="6.24983873" z3="-2.50220291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06814317" y3="4.94887554" z3="-4.34940878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89077863" y3="5.89738812" z3="-3.79455067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21673252" y3="5.24658814" z3="-4.96927955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7083823" y3="6.96048683" z3="-3.97423189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4819697" y3="-2.2024015" z3="-0.29295201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45291816" y3="-2.99332324" z3="-1.06159049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00844493" y3="-2.58695077" z3="0.59535392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09829341" y3="-1.38237307" z3="-0.70787365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18223817" y3="-1.42397676" z3="-1.14714234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32056744" y3="-0.38256653" z3="-1.49199462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10564823" y3="-1.54833871" z3="-0.94388229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42418861" y3="-2.07625993" z3="-1.99964707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3416,.0509,-.1912;7.3885,.1651,.4161;6.6491,.4397,-.3424;4.7302,1.2342,-2.2621;4.3897,.4348,-1.1832;2.7289,.8444,-3.6599;3.6355,1.7465,-3.1348;1.3833,2.5896,-4.6153;1.5612,1.2488,-4.3724;.5042,2.9254,-5.1741;2.9236,-.4858,-3.4379;3.0993,.0471,-.9992;2.4012,-1.0975,-1.9966;.9299,-.9673,-1.8216;3.1043,-2.4216,-1.8422;-.141,-3.6168,.6704;-.0071,-5.2512,-4.7468;-.2371,-4.9943,-3.7092;-.839,-4.3057,-1.0901;.7865,-4.5873,-2.8553;-1.5544,-5.0829,-3.2534;-1.8563,-4.7331,-1.9397;.4975,-4.2579,-1.5295;1.8193,-4.5055,-3.2002;-2.3521,-5.3964,-3.9301;-2.8928,-4.7723,-1.5981;-1.0296,-3.8592,.2311;-2.1703,-3.6498,.8768;-3.0574,-4.1133,.4423;-2.1649,-3.5179,2.3441;-2.2229,-3.3406,5.1424;-3.3598,-3.7302,3.0474;-.9988,-3.2225,3.0661;-1.0252,-3.1344,4.4549;-3.3878,-3.644,4.4364;-4.2741,-3.9727,2.4987;-.0403,-3.0822,2.5613;-.0966,-2.9248,4.9939;-4.325,-3.821,4.9715;-2.2428,-3.28,6.2341;1.4162,-3.8944,-.6238;2.1759,-3.3902,-1.0748;.5199,.2442,-4.7086;-3.0837,-1.7236,.0241;-2.9067,-.9751,1.1869;-1.8449,-.3244,1.5191;-.3757,.5585,1.222;-.4562,1.4548,-.406;.9827,-.6901,1.405;-.3731,1.7544,2.6639;-3.8795,-.9687,2.0872;-3.6485,-.3585,3.3471;-.2131,.7646,-1.2319;.3141,2.2487,-.4013;-1.4382,1.9332,-.5688;1.0114,-1.0531,2.4461;1.9541,-.2241,1.167;.8614,-1.5337,.7061;-.4259,1.2174,3.6275;.5585,2.3492,2.6612;-1.2207,2.4607,2.6116;-2.7851,-.8159,3.8562;-4.562,-.5348,3.9304;-3.4788,.7243,3.2298;4.8413,-.7034,.9929;4.4149,-2.0304,.8563;3.7616,-2.6743,1.8997;3.5517,-1.9781,3.0866;4.0309,-.6859,3.2801;4.684,-.0555,2.2256;4.5217,-2.5307,-.1072;3.3652,-3.6832,1.7778;2.6885,-2.5755,4.1105;3.8486,-.1739,4.226;5.0277,.9763,2.3397;-.7966,.4666,-4.283;-1.778,-.4997,-4.4608;-1.4322,-1.6919,-5.0865;-.1462,-1.9247,-5.5642;.828,-.9555,-5.3647;-1.0398,1.3904,-3.7518;-2.7964,-.3521,-4.1004;-2.4459,-2.7394,-5.2272;.0822,-2.8654,-6.0654;1.8495,-1.1428,-5.7001;2.3526,-1.8775,5.0469;2.3163,-3.7189,3.9465;-2.2252,-3.6398,-6.0086;-3.447,-2.6541,-4.5437;7.074,1.1585,-1.4927;6.1135,1.5478,-2.4713;8.4433,1.4844,-1.6921;8.854,2.1476,-2.8225;9.1694,1.1859,-.9296;9.9108,2.3871,-2.9678;6.5744,2.2149,-3.6405;7.9067,2.5066,-3.8111;5.8533,2.4878,-4.4144;8.2386,3.0139,-4.7216;3.4065,3.1502,-3.3343;2.2912,3.5628,-4.1215;4.216,4.1612,-2.7431;3.9673,5.494,-2.9694;5.0445,3.8725,-2.0944;4.6054,6.2498,-2.5022;2.0681,4.9489,-4.3494;2.8908,5.8974,-3.7946;1.2167,5.2466,-4.9693;2.7084,6.9605,-3.9742;-4.482,-2.2024,-.293;-4.4529,-2.9933,-1.0616;-5.0084,-2.587,.5954;-5.0983,-1.3824,-.7079;-2.1822,-1.424,-1.1471;-2.3206,-.3826,-1.492;-1.1056,-1.5483,-.9439;-2.4242,-2.0763,-1.9996;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424966327</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001236985511 0.000199864796 0.019960699287 0.005336844194</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030716332 -0.000315137 0.000076338 0.000130276 0.000186963 0.000327369 0.000374510 0.000525131 0.000609332 0.000833830 0.000946605 0.001062527 0.001211980 0.001316929 0.001412848 0.001467304 0.001529190 0.001731589 0.001805116 0.001905030 0.002128243 0.002334976 0.002421787 0.002504399 0.002676182 0.003033836 0.003062397 0.003244055 0.003529409 0.003860069 0.004455475 0.004685817 0.004761372 0.005109611 0.006017775 0.006075744 0.006317833 0.006659968 0.006940604 0.007659592 0.008108275 0.008161473 0.008389236 0.009404002 0.009931635 0.010098023 0.010255791 0.011156168 0.011937066 0.012168032 0.012997778 0.013109739 0.014228904 0.014766419 0.015372127 0.015677518 0.015966684 0.016661066 0.016768162 0.017514685 0.018205767 0.018750368 0.019390062 0.019619887 0.020190631 0.020702968 0.021243836 0.021426054 0.022284801 0.023115100 0.023860136 0.026411238 0.026868918 0.027814767 0.028180017 0.029564079 0.030436835 0.031608587 0.033295352 0.033662670 0.034140330 0.035789671 0.037159295 0.037420677 0.039513222 0.040062818 0.040349899 0.040979623 0.042571406 0.044687419 0.045556114 0.047128654 0.048033380 0.049280189 0.050506719 0.051077709 0.051302166 0.051664694 0.052489605 0.052698860 0.052956606 0.053222596 0.054831299 0.054981252 0.056059786 0.056352037 0.056575690 0.057003136 0.057227530 0.059204006 0.060583794 0.061058850 0.061824705 0.062413129 0.063418276 0.064534740 0.065316478 0.066000877 0.066614837 0.068405262 0.069146157 0.070278292 0.072756601 0.074412518 0.074804616 0.076524084 0.078779133 0.084394995 0.086908189 0.087152219 0.087627245 0.089496026 0.090662297 0.091484127 0.094207654 0.094995032 0.095847440 0.096480445 0.097861059 0.098836060 0.100220711 0.100765499 0.101296774 0.102612392 0.103225522 0.103767081 0.104480179 0.104824131 0.106348434 0.107035488 0.108179017 0.110015145 0.111168267 0.112442614 0.113553821 0.115075430 0.116275583 0.116833330 0.118758032 0.121337282 0.122468583 0.123731877 0.125189750 0.126223956 0.126335385 0.126736550 0.127564943 0.132126818 0.135109389 0.135870570 0.142857741 0.143897134 0.147089594 0.147593372 0.149762830 0.152035523 0.154704352 0.155108749 0.156668875 0.161387446 0.161994815 0.173770188 0.174323097 0.181807169 0.185203441 0.186469662 0.189643100 0.190451667 0.194237426 0.195601222 0.198796801 0.200351889 0.205252942 0.207124478 0.207436359 0.210279425 0.216541251 0.217071962 0.217964475 0.219917620 0.220892378 0.225392934 0.226738712 0.232391275 0.235184215 0.235715114 0.236088703 0.244731016 0.256129932 0.257300321 0.263999951 0.269981565 0.280768339 0.283492407 0.286360074 0.291979255 0.297039758 0.304473183 0.305993644 0.307312871 0.314484427 0.316800347 0.317411078 0.322241041 0.330143071 0.332917622 0.351835727 0.352891573 0.355090333 0.355938264 0.360094968 0.363051207 0.364534949 0.384102364 0.386075536 0.392243308 0.410578479 0.426023868 0.431243969 0.462465805 0.469195499 0.479051429 0.484419634 0.484614870 0.487566811 0.491493586 0.509681114 0.515573654 0.535384591 0.569304189 0.575297721 0.591591493 0.594166538 0.607349729 0.608468928 0.644963013 0.647849722 0.649763024 0.674429444 0.678450785 0.687027910 0.692713396 0.693693767 0.700133031 0.704788091 0.718480866 0.742272044 0.751435001 0.759449939 0.771953062 0.774347086 0.779646034 0.811010355 0.816452568 0.820149845 0.823102333 0.823710364 0.832217756 0.835019945 0.837866704 0.842595826 0.845954061 0.847668146 0.850221484 0.859557545 0.865951644 0.868738785 0.874665958 0.886178639 0.887608116 0.889780977 0.900794134 0.901115118 0.904168368 0.924091286 0.928113452 0.936577204 0.937889049 0.966374444 0.976416174 0.987224853 1.001738221 1.020260555 1.028697412 1.042508618 1.051961113 1.058222798 1.068884511 1.086984968 1.088873768 1.105030347 1.108372709 1.112768447 1.127565165 1.136190316 1.141141351 1.145124450 1.176508322 1.179152770 1.181812758 1.187321686 1.191626368 1.198174873 1.224753619 1.228893009 1.274705142 1.302805648 1.321395958 1.328434129 1.333279513 1.336599114 1.338041913 1.342145434 1.343920833 1.345118289 1.359770745 1.379551965 1.383333560 1.385769919 1.409847636 1.420586851 1.431593702 1.551509507 1.685581712 1.776254289</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">290</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.344392" y3="0.0560909" z3="-0.19034166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39290109" y3="0.16436374" z3="0.41216453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65247963" y3="0.43972106" z3="-0.34520262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73202437" y3="1.2377313" z3="-2.26190295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39156344" y3="0.44073605" z3="-1.18110761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72993956" y3="0.84686774" z3="-3.65788251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63730829" y3="1.74956206" z3="-3.13485663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38468149" y3="2.59129416" z3="-4.61579915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56257279" y3="1.25040618" z3="-4.37123891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50586882" y3="2.9261211" z3="-5.17565424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92347333" y3="-0.48299533" z3="-3.43290371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1005875" y3="0.05464543" z3="-0.99488931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40093094" y3="-1.0912338" z3="-1.9900176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92972253" y3="-0.95929918" z3="-1.81490091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10260431" y3="-2.41578882" z3="-1.83371907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14555002" y3="-3.61718397" z3="0.67024074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00630879" y3="-5.23848585" z3="-4.74944968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23717101" y3="-4.98525445" z3="-3.71119783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84046543" y3="-4.30629306" z3="-1.09055243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78517783" y3="-4.57788271" z3="-2.85609986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55315745" y3="-5.08017033" z3="-3.25600515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85567817" y3="-4.73511475" z3="-1.94109352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4957054" y3="-4.25345429" z3="-1.52920304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81952599" y3="-4.49643292" z3="-3.20109684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35058895" y3="-5.39254219" z3="-3.9341074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8935753" y3="-4.77494253" z3="-1.59973568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0324637" y3="-3.86272558" z3="0.23141609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17336422" y3="-3.65398248" z3="0.87632472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05945242" y3="-4.11776745" z3="0.4412775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16847696" y3="-3.52265311" z3="2.34367255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22544431" y3="-3.34675139" z3="5.14216771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36309985" y3="-3.73587929" z3="3.04710706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00236817" y3="-3.22674185" z3="3.06545407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02809835" y3="-3.13945135" z3="4.45438163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39075115" y3="-3.65008463" z3="4.43631092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27711575" y3="-3.97912536" z3="2.49865179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.044218" y3="-3.08484819" z3="2.56062335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10002241" y3="-2.92844534" z3="4.9928729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32753902" y3="-3.82788355" z3="4.97153315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24512147" y3="-3.28649971" z3="6.23391997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41337711" y3="-3.89104903" z3="-0.62176264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17348901" y3="-3.38487504" z3="-1.07061487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52166725" y3="0.24514454" z3="-4.7071046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08469849" y3="-1.72648669" z3="0.02460698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91019176" y3="-0.97955488" z3="1.18884957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84928072" y3="-0.32892929" z3="1.52415292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37972325" y3="0.55530192" z3="1.23167578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45949284" y3="1.45793996" z3="-0.39301167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97976378" y3="-0.69261056" z3="1.40903573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37789823" y3="1.74454164" z3="2.67915461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88468681" y3="-0.9749361" z3="2.08730094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65675137" y3="-0.36553724" z3="3.3481649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21788729" y3="0.7700414" z3="-1.22139637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31219624" y3="2.2503719" z3="-0.3865688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4407883" y3="1.93905208" z3="-0.55305551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01123027" y3="-1.0570889" z3="2.4490961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9502401" y3="-0.22519054" z3="1.169967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85844117" y3="-1.53482829" z3="0.70874746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43308969" y3="1.20252027" z3="3.63999219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55425042" y3="2.33829597" z3="2.68116672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22460366" y3="2.45220568" z3="2.62881142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79341107" y3="-0.82175353" z3="3.85831247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.570893" y3="-0.54391474" z3="3.929982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48851526" y3="0.71760899" z3="3.23202556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84417067" y3="-0.69659969" z3="0.99500771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42114716" y3="-2.02501966" z3="0.86043148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76706725" y3="-2.66811511" z3="1.90395224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5525228" y3="-1.969742" z3="3.08835218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02790187" y3="-0.67581741" z3="3.27975453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68209385" y3="-0.04626489" z3="2.22548279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52851996" y3="-2.52631579" z3="-0.10361331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37297806" y3="-3.67805453" z3="1.78340372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6886941" y3="-2.56680418" z3="4.11190595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84053546" y3="-0.16173977" z3="4.22261157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0223739" y3="0.98679529" z3="2.3375129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79525517" y3="0.46726157" z3="-4.2830958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77640511" y3="-0.49897398" z3="-4.46224897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43011485" y3="-1.69079688" z3="-5.08793544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14359861" y3="-1.92371915" z3="-5.56416674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83058086" y3="-0.95453343" z3="-5.36272559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03897479" y3="1.39104679" z3="-3.75205148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79517029" y3="-0.35141637" z3="-4.10297967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44390203" y3="-2.7376034" z3="-5.23141856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08572201" y3="-2.86419887" z3="-6.0655095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85233975" y3="-1.14204079" z3="-5.69655531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35185003" y3="-1.86836662" z3="5.04877859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31895228" y3="-3.71079045" z3="3.94926983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22248794" y3="-3.63673931" z3="-6.0141321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44566966" y3="-2.65284744" z3="-4.54923385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07711129" y3="1.155891" z3="-1.49754505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1157156" y3="1.54713637" z3="-2.47442844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44726526" y3="1.47702603" z3="-1.70074096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85753229" y3="2.13587223" z3="-2.83366463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.174282" y3="1.17748867" z3="-0.93950674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91522785" y3="2.37237563" z3="-2.98187999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57607509" y3="2.21018784" z3="-3.64604218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90875899" y3="2.4955277" z3="-3.82078748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85394024" y3="2.48325693" z3="-4.41905968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24016737" y3="2.99844697" z3="-4.73340612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40969287" y3="3.15292413" z3="-3.33814883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29394263" y3="3.56447138" z3="-4.12534381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22153452" y3="4.16445329" z3="-2.75129633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97367715" y3="5.49712258" z3="-2.98060707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05113863" y3="3.87633662" z3="-2.10367929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61411437" y3="6.25294005" z3="-2.5176688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07219679" y3="4.94988148" z3="-4.3568415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89620711" y3="5.89947124" z3="-3.80501863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22028883" y3="5.24676127" z3="-4.97642784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71422584" y3="6.96249966" z3="-3.98688747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48226793" y3="-2.20492985" z3="-0.29596017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4518591" y3="-2.99392939" z3="-1.06655434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00976875" y3="-2.59181757" z3="0.59081666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09853234" y3="-1.38427139" z3="-0.70979989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18085372" y3="-1.42467704" z3="-1.14414306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31953527" y3="-0.38318971" z3="-1.48886526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10418573" y3="-1.54832454" z3="-0.93834675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41947211" y3="-2.07676476" z3="-1.99769104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3444,.0561,-.1903;7.3929,.1644,.4122;6.6525,.4397,-.3452;4.732,1.2377,-2.2619;4.3916,.4407,-1.1811;2.7299,.8469,-3.6579;3.6373,1.7496,-3.1349;1.3847,2.5913,-4.6158;1.5626,1.2504,-4.3712;.5059,2.9261,-5.1757;2.9235,-.483,-3.4329;3.1006,.0546,-.9949;2.4009,-1.0912,-1.99;.9297,-.9593,-1.8149;3.1026,-2.4158,-1.8337;-.1456,-3.6172,.6702;-.0063,-5.2385,-4.7494;-.2372,-4.9853,-3.7112;-.8405,-4.3063,-1.0906;.7852,-4.5779,-2.8561;-1.5532,-5.0802,-3.256;-1.8557,-4.7351,-1.9411;.4957,-4.2535,-1.5292;1.8195,-4.4964,-3.2011;-2.3506,-5.3925,-3.9341;-2.8936,-4.7749,-1.5997;-1.0325,-3.8627,.2314;-2.1734,-3.654,.8763;-3.0595,-4.1178,.4413;-2.1685,-3.5227,2.3437;-2.2254,-3.3468,5.1422;-3.3631,-3.7359,3.0471;-1.0024,-3.2267,3.0655;-1.0281,-3.1395,4.4544;-3.3908,-3.6501,4.4363;-4.2771,-3.9791,2.4987;-.0442,-3.0848,2.5606;-.1,-2.9284,4.9929;-4.3275,-3.8279,4.9715;-2.2451,-3.2865,6.2339;1.4134,-3.891,-.6218;2.1735,-3.3849,-1.0706;.5217,.2451,-4.7071;-3.0847,-1.7265,.0246;-2.9102,-.9796,1.1888;-1.8493,-.3289,1.5242;-.3797,.5553,1.2317;-.4595,1.4579,-.393;.9798,-.6926,1.409;-.3779,1.7445,2.6792;-3.8847,-.9749,2.0873;-3.6568,-.3655,3.3482;-.2179,.77,-1.2214;.3122,2.2504,-.3866;-1.4408,1.9391,-.5531;1.0112,-1.0571,2.4491;1.9502,-.2252,1.17;.8584,-1.5348,.7087;-.4331,1.2025,3.64;.5543,2.3383,2.6812;-1.2246,2.4522,2.6288;-2.7934,-.8218,3.8583;-4.5709,-.5439,3.93;-3.4885,.7176,3.232;4.8442,-.6966,.995;4.4211,-2.025,.8604;3.7671,-2.6681,1.904;3.5525,-1.9697,3.0884;4.0279,-.6758,3.2798;4.6821,-.0463,2.2255;4.5285,-2.5263,-.1036;3.373,-3.6781,1.7834;2.6887,-2.5668,4.1119;3.8405,-.1617,4.2226;5.0224,.9868,2.3375;-.7953,.4673,-4.2831;-1.7764,-.499,-4.4622;-1.4301,-1.6908,-5.0879;-.1436,-1.9237,-5.5642;.8306,-.9545,-5.3627;-1.039,1.391,-3.7521;-2.7952,-.3514,-4.103;-2.4439,-2.7376,-5.2314;.0857,-2.8642,-6.0655;1.8523,-1.142,-5.6966;2.3519,-1.8684,5.0488;2.319,-3.7108,3.9493;-2.2225,-3.6367,-6.0141;-3.4457,-2.6528,-4.5492;7.0771,1.1559,-1.4975;6.1157,1.5471,-2.4744;8.4473,1.477,-1.7007;8.8575,2.1359,-2.8337;9.1743,1.1775,-.9395;9.9152,2.3724,-2.9819;6.5761,2.2102,-3.646;7.9088,2.4955,-3.8208;5.8539,2.4833,-4.4191;8.2402,2.9984,-4.7334;3.4097,3.1529,-3.3381;2.2939,3.5645,-4.1253;4.2215,4.1645,-2.7513;3.9737,5.4971,-2.9806;5.0511,3.8763,-2.1037;4.6141,6.2529,-2.5177;2.0722,4.9499,-4.3568;2.8962,5.8995,-3.805;1.2203,5.2468,-4.9764;2.7142,6.9625,-3.9869;-4.4823,-2.2049,-.296;-4.4519,-2.9939,-1.0666;-5.0098,-2.5918,.5908;-5.0985,-1.3843,-.7098;-2.1809,-1.4247,-1.1441;-2.3195,-.3832,-1.4889;-1.1042,-1.5483,-.9383;-2.4195,-2.0768,-1.9977;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420242966</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001746135146 0.000240105326 0.017453515872 0.005343694626</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030716415 -0.000407430 0.000083871 0.000140961 0.000230836 0.000337165 0.000375031 0.000498543 0.000603510 0.000831896 0.000934342 0.001061657 0.001212186 0.001326625 0.001412321 0.001467686 0.001529407 0.001725809 0.001796835 0.001904677 0.002127331 0.002336279 0.002419183 0.002506663 0.002677294 0.003034484 0.003063482 0.003244052 0.003531595 0.003863122 0.004456633 0.004685893 0.004761406 0.005113580 0.006018333 0.006075827 0.006321990 0.006661529 0.006948741 0.007659512 0.008109066 0.008161873 0.008395520 0.009409301 0.009930941 0.010100978 0.010253410 0.011156956 0.011937534 0.012175519 0.012997784 0.013110722 0.014230434 0.014784122 0.015379344 0.015682138 0.015967334 0.016662174 0.016774996 0.017515226 0.018207900 0.018750907 0.019390957 0.019619948 0.020195197 0.020708086 0.021244213 0.021426084 0.022284964 0.023117390 0.023862342 0.026423405 0.026869199 0.027816207 0.028182899 0.029566269 0.030439283 0.031608686 0.033294619 0.033665079 0.034140662 0.035789995 0.037159210 0.037423656 0.039515090 0.040064269 0.040351008 0.040990473 0.042572303 0.044689247 0.045557999 0.047128817 0.048033477 0.049280361 0.050506589 0.051077726 0.051302604 0.051667791 0.052489710 0.052700039 0.052956924 0.053222803 0.054833879 0.054981296 0.056062423 0.056352807 0.056576452 0.057009207 0.057227565 0.059204408 0.060586587 0.061059326 0.061824896 0.062413665 0.063417913 0.064534761 0.065317945 0.066001474 0.066615212 0.068405952 0.069146640 0.070278853 0.072757590 0.074413056 0.074804622 0.076524423 0.078815477 0.084407125 0.086917659 0.087152210 0.087627227 0.089510666 0.090662457 0.091484624 0.094214848 0.094995222 0.095848787 0.096481548 0.097862959 0.098836631 0.100222062 0.100773177 0.101386379 0.102620321 0.103227223 0.103768247 0.104480526 0.104839288 0.106348669 0.107035882 0.108181038 0.110015430 0.111169718 0.112443501 0.113555563 0.115081519 0.116276415 0.116833490 0.118759180 0.121337367 0.122468747 0.123734037 0.125190224 0.126224196 0.126335055 0.126743761 0.127570724 0.132126719 0.135109873 0.135871042 0.142867341 0.143905706 0.147090828 0.147593495 0.149763777 0.152040747 0.154704669 0.155108966 0.156671044 0.161386761 0.161995030 0.173770586 0.174338532 0.181815484 0.185207217 0.186471387 0.189643925 0.190451428 0.194266414 0.195612552 0.198811939 0.200353556 0.205254167 0.207130643 0.207436709 0.210280558 0.216547519 0.217077938 0.217964912 0.219919150 0.220893686 0.225393719 0.226739366 0.232392102 0.235184144 0.235715254 0.236089229 0.244735056 0.256129969 0.257303851 0.264000393 0.269981747 0.280768627 0.283492778 0.286360214 0.291979787 0.297040648 0.304480578 0.305993678 0.307313955 0.314485104 0.316807191 0.317413066 0.322241094 0.330143138 0.332921633 0.351837486 0.352904114 0.355090461 0.355939811 0.360095341 0.363056185 0.364546008 0.384104627 0.386081553 0.392246504 0.410579483 0.426031989 0.431244854 0.462467386 0.469197205 0.479051621 0.484431472 0.484616963 0.487568168 0.491493869 0.509682668 0.515574651 0.535385220 0.569305008 0.575312126 0.591591559 0.594186614 0.607350130 0.608471676 0.644964363 0.647852924 0.649763527 0.674429849 0.678451390 0.687094611 0.692756953 0.693694977 0.700145408 0.704789820 0.718484617 0.742272733 0.751436505 0.759452247 0.771984373 0.774381295 0.779649285 0.811011861 0.816453137 0.820150124 0.823108438 0.823711160 0.832218051 0.835019961 0.837868809 0.842596989 0.845955274 0.847668206 0.850221675 0.859558738 0.865951801 0.868739359 0.874676680 0.886178705 0.887616849 0.889781327 0.900798164 0.901116520 0.904172780 0.924094525 0.928117335 0.936578748 0.937897661 0.966375658 0.976417909 0.987249328 1.001741153 1.020265202 1.028701874 1.042513513 1.051968454 1.058229099 1.068884538 1.086989270 1.088879251 1.105049931 1.108524939 1.112775822 1.127571798 1.136210993 1.141145467 1.145126878 1.176518875 1.179152970 1.181812795 1.187322504 1.191628243 1.198200076 1.224753835 1.228899679 1.274720849 1.302806668 1.321396771 1.328434537 1.333283557 1.336600568 1.338049335 1.342174728 1.343954474 1.345121097 1.359773234 1.379562743 1.383334057 1.385772948 1.409855624 1.420622545 1.431603770 1.551509550 1.685672330 1.776264729</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">291</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34275551" y3="0.05883253" z3="-0.19218285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39142416" y3="0.16382593" z3="0.4112585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6519023" y3="0.44075855" z3="-0.34632585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73355154" y3="1.23998031" z3="-2.26480088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3910988" y3="0.44491867" z3="-1.18342868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7310888" y3="0.85230461" z3="-3.66081578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64034616" y3="1.75323639" z3="-3.13881526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39034567" y3="2.59786778" z3="-4.62206861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56490978" y3="1.25759114" z3="-4.37503305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51223397" y3="2.93436639" z3="-5.18192078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92169632" y3="-0.47764079" z3="-3.43447238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09947816" y3="0.06197647" z3="-0.9972951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39817253" y3="-1.08363808" z3="-1.99123993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92725652" y3="-0.9495769" z3="-1.81593273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09847948" y3="-2.40890105" z3="-1.83446949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1436523" y3="-3.62510043" z3="0.67519289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0077938" y3="-5.23675445" z3="-4.7483564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23784414" y3="-4.98536757" z3="-3.70935887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84094919" y3="-4.30992785" z3="-1.08705304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78447756" y3="-4.57481624" z3="-2.85555641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55408394" y3="-5.08413863" z3="-3.25194309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85662122" y3="-4.74131839" z3="-1.93636627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49487848" y3="-4.25195887" z3="-1.52815839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81581358" y3="-4.48406479" z3="-3.20172611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3503038" y3="-5.40075335" z3="-3.92863937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8921511" y3="-4.78950403" z3="-1.59305038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03250925" y3="-3.86744152" z3="0.2353322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1735488" y3="-3.65802009" z3="0.88038604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06049868" y3="-4.12236375" z3="0.44621953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16784091" y3="-3.52574731" z3="2.34776426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22404411" y3="-3.3463306" z3="5.14594323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36166576" y3="-3.7405421" z3="3.05186592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00195728" y3="-3.22672312" z3="3.06872978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0274948" y3="-3.13741984" z3="4.45748536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38867922" y3="-3.65336854" z3="4.44098471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27587374" y3="-3.98560806" z3="2.50395514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04412252" y3="-3.08393634" z3="2.56327067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09892817" y3="-2.92477686" z3="4.99544188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32473077" y3="-3.83257862" z3="4.97684207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24334332" y3="-3.28486164" z3="6.23762702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41150524" y3="-3.88496437" z3="-0.62220364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17035243" y3="-3.3774466" z3="-1.07189372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5230147" y3="0.25301194" z3="-4.70996189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08477085" y3="-1.73405648" z3="0.02570659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91398558" y3="-0.98677241" z3="1.19029993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85400058" y3="-0.33617574" z3="1.52872206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3871514" y3="0.55261482" z3="1.23665606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4721051" y3="1.45795834" z3="-0.38596061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97659745" y3="-0.69162936" z3="1.40977104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3881045" y3="1.73807992" z3="2.68721127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89117171" y3="-0.98250396" z3="2.08559466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66782844" y3="-0.37162346" z3="3.34660003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22602516" y3="0.77312429" z3="-1.21545475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29513872" y3="2.25465367" z3="-0.37724801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45588238" y3="1.93324427" z3="-0.54611683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01110693" y3="-1.05705855" z3="2.44964588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94554492" y3="-0.22164448" z3="1.1688364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85577672" y3="-1.53416888" z3="0.70957707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.44321053" y3="1.19337148" z3="3.64633285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54347295" y3="2.33284708" z3="2.69174651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23565829" y3="2.44459893" z3="2.63832784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80540548" y3="-0.82659375" z3="3.85973587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58366024" y3="-0.55064018" z3="3.92545026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50082674" y3="0.71182726" z3="3.23014491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84109587" y3="-0.69356007" z3="0.99262519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41796211" y3="-2.02176055" z3="0.85752428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76489459" y3="-2.66554277" z3="1.90125041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55209235" y3="-1.96825881" z3="3.08695879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02742182" y3="-0.67444684" z3="3.27875848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68026692" y3="-0.0440908" z3="2.22407357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52751207" y3="-2.52331123" z3="-0.10486296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37160527" y3="-3.67555803" z3="1.78069978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68915826" y3="-2.56629747" z3="4.11068382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8427195" y3="-0.16164092" z3="4.22378624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02173896" y3="0.98867335" z3="2.33734122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79314387" y3="0.4747447" z3="-4.28297065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77402846" y3="-0.49238977" z3="-4.45920962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4282219" y3="-1.68438011" z3="-5.08517361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14261693" y3="-1.91659437" z3="-5.56468104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83125206" y3="-0.94678971" z3="-5.36593081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0361628" y3="1.39874572" z3="-3.75195815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79209099" y3="-0.34548547" z3="-4.09714995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44122744" y3="-2.73253276" z3="-5.22558249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08589124" y3="-2.85720118" z3="-6.06604878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85262444" y3="-1.13368984" z3="-5.70214607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35374751" y3="-1.86940999" z3="5.04785902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31610367" y3="-3.7093797" z3="3.94537588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22091044" y3="-3.63115465" z3="-6.00882381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44122667" y3="-2.64932872" z3="-4.5403202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07844316" y3="1.15475095" z3="-1.49914599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1181032" y3="1.54630498" z3="-2.4769932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44933007" y3="1.47185635" z3="-1.70252868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86162876" y3="2.12804632" z3="-2.83639093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17545329" y3="1.17177444" z3="-0.94067001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91964786" y3="2.35969724" z3="-2.98524873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58047514" y3="2.20687529" z3="-3.64930776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91423398" y3="2.48925163" z3="-3.82413128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85943351" y3="2.48135226" z3="-4.42271351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24722749" y3="2.99072522" z3="-4.73741041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41599929" y3="3.15693312" z3="-3.34408556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3015033" y3="3.57007264" z3="-4.1321403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22990541" y3="4.1676013" z3="-2.75827892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98618992" y3="5.50017677" z3="-2.99079599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05802706" y3="3.87876838" z3="-2.10923673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62783952" y3="6.25589338" z3="-2.52809914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08307152" y3="4.95604024" z3="-4.36558036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91009991" y3="5.90386187" z3="-3.81629398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23209346" y3="5.25421678" z3="-4.98578285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73167936" y3="6.9667501" z3="-4.00083846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48117201" y3="-2.21409994" z3="-0.29794685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4481178" y3="-3.00186729" z3="-1.06966169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00968911" y3="-2.60310965" z3="0.58719099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09792999" y3="-1.39364531" z3="-0.71150044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17918205" y3="-1.43077468" z3="-1.14147615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31942026" y3="-0.38971411" z3="-1.48608185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10293756" y3="-1.55208637" z3="-0.93397244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41572585" y3="-2.08287815" z3="-1.99580584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3428,.0588,-.1922;7.3914,.1638,.4113;6.6519,.4408,-.3463;4.7336,1.24,-2.2648;4.3911,.4449,-1.1834;2.7311,.8523,-3.6608;3.6403,1.7532,-3.1388;1.3903,2.5979,-4.6221;1.5649,1.2576,-4.375;.5122,2.9344,-5.1819;2.9217,-.4776,-3.4345;3.0995,.062,-.9973;2.3982,-1.0836,-1.9912;.9273,-.9496,-1.8159;3.0985,-2.4089,-1.8345;-.1437,-3.6251,.6752;-.0078,-5.2368,-4.7484;-.2378,-4.9854,-3.7094;-.8409,-4.3099,-1.0871;.7845,-4.5748,-2.8556;-1.5541,-5.0841,-3.2519;-1.8566,-4.7413,-1.9364;.4949,-4.252,-1.5282;1.8158,-4.4841,-3.2017;-2.3503,-5.4008,-3.9286;-2.8922,-4.7895,-1.5931;-1.0325,-3.8674,.2353;-2.1735,-3.658,.8804;-3.0605,-4.1224,.4462;-2.1678,-3.5257,2.3478;-2.224,-3.3463,5.1459;-3.3617,-3.7405,3.0519;-1.002,-3.2267,3.0687;-1.0275,-3.1374,4.4575;-3.3887,-3.6534,4.441;-4.2759,-3.9856,2.504;-.0441,-3.0839,2.5633;-.0989,-2.9248,4.9954;-4.3247,-3.8326,4.9768;-2.2433,-3.2849,6.2376;1.4115,-3.885,-.6222;2.1704,-3.3774,-1.0719;.523,.253,-4.71;-3.0848,-1.7341,.0257;-2.914,-.9868,1.1903;-1.854,-.3362,1.5287;-.3872,.5526,1.2367;-.4721,1.458,-.386;.9766,-.6916,1.4098;-.3881,1.7381,2.6872;-3.8912,-.9825,2.0856;-3.6678,-.3716,3.3466;-.226,.7731,-1.2155;.2951,2.2547,-.3772;-1.4559,1.9332,-.5461;1.0111,-1.0571,2.4496;1.9455,-.2216,1.1688;.8558,-1.5342,.7096;-.4432,1.1934,3.6463;.5435,2.3328,2.6917;-1.2357,2.4446,2.6383;-2.8054,-.8266,3.8597;-4.5837,-.5506,3.9255;-3.5008,.7118,3.2301;4.8411,-.6936,.9926;4.418,-2.0218,.8575;3.7649,-2.6655,1.9013;3.5521,-1.9683,3.087;4.0274,-.6744,3.2788;4.6803,-.0441,2.2241;4.5275,-2.5233,-.1049;3.3716,-3.6756,1.7807;2.6892,-2.5663,4.1107;3.8427,-.1616,4.2238;5.0217,.9887,2.3373;-.7931,.4747,-4.283;-1.774,-.4924,-4.4592;-1.4282,-1.6844,-5.0852;-.1426,-1.9166,-5.5647;.8313,-.9468,-5.3659;-1.0362,1.3987,-3.752;-2.7921,-.3455,-4.0971;-2.4412,-2.7325,-5.2256;.0859,-2.8572,-6.066;1.8526,-1.1337,-5.7021;2.3537,-1.8694,5.0479;2.3161,-3.7094,3.9454;-2.2209,-3.6312,-6.0088;-3.4412,-2.6493,-4.5403;7.0784,1.1548,-1.4991;6.1181,1.5463,-2.477;8.4493,1.4719,-1.7025;8.8616,2.128,-2.8364;9.1755,1.1718,-.9407;9.9196,2.3597,-2.9852;6.5805,2.2069,-3.6493;7.9142,2.4893,-3.8241;5.8594,2.4814,-4.4227;8.2472,2.9907,-4.7374;3.416,3.1569,-3.3441;2.3015,3.5701,-4.1321;4.2299,4.1676,-2.7583;3.9862,5.5002,-2.9908;5.058,3.8788,-2.1092;4.6278,6.2559,-2.5281;2.0831,4.956,-4.3656;2.9101,5.9039,-3.8163;1.2321,5.2542,-4.9858;2.7317,6.9668,-4.0008;-4.4812,-2.2141,-.2979;-4.4481,-3.0019,-1.0697;-5.0097,-2.6031,.5872;-5.0979,-1.3936,-.7115;-2.1792,-1.4308,-1.1415;-2.3194,-.3897,-1.4861;-1.1029,-1.5521,-.934;-2.4157,-2.0829,-1.9958;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650417411738</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002064963485 0.000272647874 0.015272572863 0.005342202034</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030717368 -0.000313245 0.000084291 0.000133779 0.000213685 0.000334998 0.000384282 0.000511720 0.000606602 0.000835278 0.000938953 0.001064567 0.001213865 0.001330784 0.001412164 0.001467751 0.001532629 0.001726329 0.001797017 0.001904953 0.002128689 0.002336755 0.002419892 0.002506989 0.002677103 0.003035251 0.003063702 0.003245285 0.003533340 0.003863137 0.004457174 0.004687327 0.004761553 0.005116451 0.006018103 0.006075723 0.006324750 0.006663149 0.006952388 0.007661265 0.008110714 0.008161807 0.008403701 0.009415406 0.009932566 0.010104247 0.010254221 0.011158066 0.011938151 0.012188754 0.012999110 0.013111005 0.014230613 0.014802148 0.015385891 0.015688808 0.015969348 0.016662322 0.016778012 0.017515449 0.018210666 0.018751997 0.019391604 0.019619933 0.020202997 0.020716052 0.021244186 0.021428910 0.022285204 0.023118706 0.023863755 0.026439509 0.026870755 0.027819289 0.028183984 0.029566898 0.030442483 0.031608943 0.033295032 0.033671836 0.034143407 0.035790149 0.037159310 0.037429251 0.039518058 0.040066238 0.040351826 0.041002306 0.042572401 0.044692426 0.045562943 0.047129504 0.048033518 0.049281097 0.050507097 0.051077792 0.051302953 0.051672050 0.052489864 0.052702757 0.052957592 0.053223014 0.054835316 0.054981430 0.056067517 0.056353169 0.056576663 0.057017497 0.057227798 0.059205085 0.060591878 0.061059772 0.061825106 0.062414574 0.063417934 0.064535079 0.065318892 0.066002399 0.066615585 0.068406338 0.069148385 0.070279062 0.072759158 0.074414115 0.074804683 0.076525919 0.078875270 0.084419631 0.086933263 0.087159210 0.087630671 0.089541742 0.090662928 0.091484649 0.094235321 0.094996967 0.095848798 0.096484175 0.097864518 0.098836857 0.100223970 0.100780192 0.101507090 0.102633448 0.103227860 0.103770340 0.104483149 0.104857080 0.106348861 0.107037233 0.108182540 0.110015494 0.111170267 0.112447185 0.113559607 0.115088454 0.116277436 0.116833479 0.118759786 0.121337460 0.122470600 0.123736424 0.125190914 0.126224418 0.126335707 0.126750394 0.127578786 0.132127369 0.135110353 0.135871778 0.142896403 0.143919550 0.147092648 0.147593759 0.149763681 0.152041583 0.154704721 0.155113987 0.156673971 0.161387844 0.161995687 0.173770598 0.174359357 0.181825065 0.185209668 0.186472059 0.189645385 0.190452348 0.194302752 0.195627157 0.198836417 0.200357474 0.205254483 0.207139356 0.207436967 0.210282312 0.216553463 0.217082934 0.217965656 0.219921862 0.220893583 0.225393643 0.226740329 0.232392476 0.235184216 0.235715389 0.236089667 0.244739560 0.256130516 0.257311090 0.264001102 0.269981775 0.280771498 0.283493960 0.286360222 0.291980807 0.297040937 0.304486597 0.305993863 0.307316116 0.314485885 0.316815899 0.317417615 0.322242320 0.330143381 0.332929838 0.351838061 0.352934331 0.355090560 0.355945029 0.360095402 0.363060773 0.364553342 0.384106953 0.386089651 0.392247318 0.410579579 0.426039327 0.431247398 0.462469967 0.469198517 0.479051853 0.484466511 0.484617772 0.487568975 0.491493935 0.509684143 0.515576643 0.535386933 0.569307691 0.575327147 0.591593256 0.594209330 0.607350200 0.608473083 0.644964633 0.647857870 0.649764194 0.674430211 0.678451728 0.687201100 0.692836440 0.693699248 0.700164702 0.704794831 0.718490595 0.742273144 0.751436763 0.759455305 0.772016937 0.774439939 0.779656550 0.811013104 0.816453556 0.820150297 0.823114507 0.823711264 0.832218160 0.835020636 0.837871818 0.842598559 0.845955745 0.847668399 0.850221762 0.859566111 0.865951800 0.868739481 0.874688547 0.886178792 0.887634456 0.889781370 0.900802639 0.901117110 0.904182304 0.924096840 0.928121702 0.936578954 0.937912375 0.966378344 0.976428852 0.987277623 1.001745098 1.020272408 1.028707637 1.042521728 1.051987652 1.058241699 1.068884563 1.086995700 1.088889898 1.105080824 1.108814969 1.112784383 1.127572429 1.136243548 1.141150378 1.145128203 1.176533562 1.179154136 1.181813248 1.187324038 1.191629460 1.198260712 1.224754846 1.228915254 1.274758647 1.302807536 1.321397054 1.328435229 1.333284111 1.336600849 1.338052808 1.342189173 1.344001001 1.345129387 1.359776291 1.379603414 1.383335102 1.385773090 1.409860160 1.420667943 1.431604192 1.551509876 1.685882068 1.776286878</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">292</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34009311" y3="0.05981662" z3="-0.19467322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3879439" y3="0.1607056" z3="0.41102612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64973533" y3="0.43896899" z3="-0.34740018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73524447" y3="1.24359014" z3="-2.26733161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39013679" y3="0.44809555" z3="-1.18664511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73432857" y3="0.85773505" z3="-3.66636868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64380444" y3="1.75819265" z3="-3.14287595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3961331" y3="2.60518252" z3="-4.62900951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56912196" y3="1.2640891" z3="-4.38187411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51890599" y3="2.94213143" z3="-5.19014891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92331068" y3="-0.47247823" z3="-3.43975982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09757581" y3="0.06660869" z3="-1.00199712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39630702" y3="-1.07804859" z3="-1.99736735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9252099" y3="-0.94247397" z3="-1.82472683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0949787" y3="-2.40404611" z3="-1.83897203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14532299" y3="-3.62518304" z3="0.68075581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01007186" y3="-5.22704374" z3="-4.74545145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23955413" y3="-4.97941675" z3="-3.70559311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83926607" y3="-4.31467927" z3="-1.08070692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78231148" y3="-4.56611423" z3="-2.85281317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55308388" y3="-5.08735665" z3="-3.24622014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85370105" y3="-4.75011198" z3="-1.92890154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49456862" y3="-4.24791291" z3="-1.52401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81470183" y3="-4.47420935" z3="-3.20128829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35051935" y3="-5.4031169" z3="-3.92301805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88980187" y3="-4.80088127" z3="-1.58350377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03120677" y3="-3.8747986" z3="0.24253003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17279164" y3="-3.66551918" z3="0.88665555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05849484" y3="-4.13160183" z3="0.45288374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16804094" y3="-3.53064137" z3="2.35374932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22568761" y3="-3.34491037" z3="5.1515693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36211097" y3="-3.74475957" z3="3.05798415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00285196" y3="-3.22904259" z3="3.07444923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02879383" y3="-3.13703437" z3="4.46303875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39012188" y3="-3.65403095" z3="4.4468264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27544378" y3="-3.99239993" z3="2.5104426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04525642" y3="-3.08611773" z3="2.56910409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1010908" y3="-2.92193169" z3="5.00064485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32664828" y3="-3.83207221" z3="4.98275895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24572326" y3="-3.28061123" z3="6.24305713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41182179" y3="-3.87812025" z3="-0.61920903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16910223" y3="-3.37015896" z3="-1.07110687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52554723" y3="0.26063512" z3="-4.71436757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08510005" y3="-1.74243968" z3="0.02860007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91723054" y3="-0.99334801" z3="1.19255745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85959155" y3="-0.33930376" z3="1.53150188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.39198427" y3="0.5473676" z3="1.2352193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.48253658" y3="1.45530093" z3="-0.38593894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97190665" y3="-0.69736187" z3="1.40154105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38525331" y3="1.7306704" z3="2.6874758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89527239" y3="-0.9901076" z3="2.08708747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6748498" y3="-0.37585949" z3="3.3469888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23378112" y3="0.77261941" z3="-1.21668451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.27999543" y3="2.25636624" z3="-0.37698189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.46928701" y3="1.92574456" z3="-0.54411964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01069528" y3="-1.06336024" z3="2.44088149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93945225" y3="-0.22611438" z3="1.15810224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85021154" y3="-1.53934909" z3="0.70103413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43795193" y3="1.18486071" z3="3.64617788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54749452" y3="2.3234817" z3="2.68909112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23141794" y3="2.4392721" z3="2.64276039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81164856" y3="-0.82681069" z3="3.86195173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59058902" y3="-0.55614522" z3="3.92572014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51064668" y3="0.70753451" z3="3.2279452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83691047" y3="-0.69265943" z3="0.98950843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41419665" y3="-2.02112179" z3="0.85419234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76071746" y3="-2.66512426" z3="1.89747774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54684908" y3="-1.96765015" z3="3.08261285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02107974" y3="-0.67328102" z3="3.27438309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67415938" y3="-0.04274473" z3="2.22008368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52238602" y3="-2.52206007" z3="-0.10971766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36690306" y3="-3.67520761" z3="1.77626691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68529341" y3="-2.5663387" z3="4.10709634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83425988" y3="-0.15999666" z3="4.21791014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01379278" y3="0.99041899" z3="2.33234035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78926887" y3="0.4829703" z3="-4.28360492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77048207" y3="-0.48467311" z3="-4.45482468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4265655" y3="-1.67778213" z3="-5.07968087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14267222" y3="-1.91029097" z3="-5.56321687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83155321" y3="-0.93977883" z3="-5.36982859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03067939" y3="1.4075752" z3="-3.75288125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78734009" y3="-0.33746765" z3="-4.08973321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43973118" y3="-2.72655171" z3="-5.21409325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08465335" y3="-2.85168348" z3="-6.06371868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85156385" y3="-1.1271874" z3="-5.70918701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35146802" y3="-1.86976342" z3="5.04637262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31421763" y3="-3.70971906" z3="3.94288438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22037422" y3="-3.62900952" z3="-5.99355124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43912828" y3="-2.63957537" z3="-4.5286949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07875462" y3="1.15331576" z3="-1.49919302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12048737" y3="1.54765466" z3="-2.47786949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45044461" y3="1.46852022" z3="-1.70038979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86542893" y3="2.12488673" z3="-2.83324098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17476643" y3="1.16639632" z3="-0.93766912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92432979" y3="2.35652572" z3="-2.98009788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58564053" y3="2.20801947" z3="-3.64930754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91988223" y3="2.48790555" z3="-3.8221494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86608325" y3="2.48369993" z3="-4.4237452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25501548" y3="2.98887547" z3="-4.73469789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42161707" y3="3.16197697" z3="-3.34942315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3086658" y3="3.57609489" z3="-4.13933089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23679182" y3="4.17146598" z3="-2.76387238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99525197" y3="5.50463374" z3="-2.99725459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06406647" y3="3.88140821" z3="-2.11414646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63832151" y3="6.25893925" z3="-2.53534663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09347922" y3="4.96175606" z3="-4.37496262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92090407" y3="5.90932024" z3="-3.82455893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24387497" y3="5.26075733" z3="-4.99670225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74405096" y3="6.97267409" z3="-4.00982592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48023083" y3="-2.22466484" z3="-0.29699289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44453277" y3="-3.01392375" z3="-1.0670211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01030016" y3="-2.61248622" z3="0.58782671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09666485" y3="-1.40565062" z3="-0.71362557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17830442" y3="-1.43858764" z3="-1.13739168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31852783" y3="-0.39749934" z3="-1.4827795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10207563" y3="-1.55916683" z3="-0.92830179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41223317" y3="-2.09142405" z3="-1.99141181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3401,.0598,-.1947;7.3879,.1607,.411;6.6497,.439,-.3474;4.7352,1.2436,-2.2673;4.3901,.4481,-1.1866;2.7343,.8577,-3.6664;3.6438,1.7582,-3.1429;1.3961,2.6052,-4.629;1.5691,1.2641,-4.3819;.5189,2.9421,-5.1901;2.9233,-.4725,-3.4398;3.0976,.0666,-1.002;2.3963,-1.078,-1.9974;.9252,-.9425,-1.8247;3.095,-2.404,-1.839;-.1453,-3.6252,.6808;-.0101,-5.227,-4.7455;-.2396,-4.9794,-3.7056;-.8393,-4.3147,-1.0807;.7823,-4.5661,-2.8528;-1.5531,-5.0874,-3.2462;-1.8537,-4.7501,-1.9289;.4946,-4.2479,-1.524;1.8147,-4.4742,-3.2013;-2.3505,-5.4031,-3.923;-2.8898,-4.8009,-1.5835;-1.0312,-3.8748,.2425;-2.1728,-3.6655,.8867;-3.0585,-4.1316,.4529;-2.168,-3.5306,2.3537;-2.2257,-3.3449,5.1516;-3.3621,-3.7448,3.058;-1.0029,-3.229,3.0744;-1.0288,-3.137,4.463;-3.3901,-3.654,4.4468;-4.2754,-3.9924,2.5104;-.0453,-3.0861,2.5691;-.1011,-2.9219,5.0006;-4.3266,-3.8321,4.9828;-2.2457,-3.2806,6.2431;1.4118,-3.8781,-.6192;2.1691,-3.3702,-1.0711;.5255,.2606,-4.7144;-3.0851,-1.7424,.0286;-2.9172,-.9933,1.1926;-1.8596,-.3393,1.5315;-.392,.5474,1.2352;-.4825,1.4553,-.3859;.9719,-.6974,1.4015;-.3853,1.7307,2.6875;-3.8953,-.9901,2.0871;-3.6748,-.3759,3.347;-.2338,.7726,-1.2167;.28,2.2564,-.377;-1.4693,1.9257,-.5441;1.0107,-1.0634,2.4409;1.9395,-.2261,1.1581;.8502,-1.5393,.701;-.438,1.1849,3.6462;.5475,2.3235,2.6891;-1.2314,2.4393,2.6428;-2.8116,-.8268,3.862;-4.5906,-.5561,3.9257;-3.5106,.7075,3.2279;4.8369,-.6927,.9895;4.4142,-2.0211,.8542;3.7607,-2.6651,1.8975;3.5468,-1.9677,3.0826;4.0211,-.6733,3.2744;4.6742,-.0427,2.2201;4.5224,-2.5221,-.1097;3.3669,-3.6752,1.7763;2.6853,-2.5663,4.1071;3.8343,-.16,4.2179;5.0138,.9904,2.3323;-.7893,.483,-4.2836;-1.7705,-.4847,-4.4548;-1.4266,-1.6778,-5.0797;-.1427,-1.9103,-5.5632;.8316,-.9398,-5.3698;-1.0307,1.4076,-3.7529;-2.7873,-.3375,-4.0897;-2.4397,-2.7266,-5.2141;.0847,-2.8517,-6.0637;1.8516,-1.1272,-5.7092;2.3515,-1.8698,5.0464;2.3142,-3.7097,3.9429;-2.2204,-3.629,-5.9936;-3.4391,-2.6396,-4.5287;7.0788,1.1533,-1.4992;6.1205,1.5477,-2.4779;8.4504,1.4685,-1.7004;8.8654,2.1249,-2.8332;9.1748,1.1664,-.9377;9.9243,2.3565,-2.9801;6.5856,2.208,-3.6493;7.9199,2.4879,-3.8221;5.8661,2.4837,-4.4237;8.255,2.9889,-4.7347;3.4216,3.162,-3.3494;2.3087,3.5761,-4.1393;4.2368,4.1715,-2.7639;3.9953,5.5046,-2.9973;5.0641,3.8814,-2.1141;4.6383,6.2589,-2.5353;2.0935,4.9618,-4.375;2.9209,5.9093,-3.8246;1.2439,5.2608,-4.9967;2.7441,6.9727,-4.0098;-4.4802,-2.2247,-.297;-4.4445,-3.0139,-1.067;-5.0103,-2.6125,.5878;-5.0967,-1.4057,-.7136;-2.1783,-1.4386,-1.1374;-2.3185,-.3975,-1.4828;-1.1021,-1.5592,-.9283;-2.4122,-2.0914,-1.9914;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650416463770</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002055071336 0.000252457737 0.015172122124 0.005340224441</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030718177 -0.000218500 0.000066815 0.000151313 0.000201799 0.000333354 0.000371327 0.000497139 0.000605510 0.000835031 0.000938008 0.001064556 0.001214521 0.001338784 0.001412386 0.001470416 0.001537485 0.001726136 0.001797110 0.001905567 0.002128952 0.002339311 0.002422332 0.002509423 0.002678150 0.003036227 0.003068218 0.003245016 0.003534837 0.003863513 0.004457163 0.004694946 0.004761464 0.005118218 0.006018087 0.006075796 0.006327255 0.006663919 0.006954452 0.007664603 0.008113131 0.008161754 0.008410355 0.009420051 0.009932700 0.010104965 0.010257306 0.011161279 0.011939632 0.012199430 0.013001184 0.013111066 0.014230731 0.014819817 0.015388796 0.015692636 0.015970241 0.016663748 0.016779888 0.017515817 0.018215315 0.018755398 0.019392115 0.019620017 0.020208689 0.020725190 0.021244336 0.021429553 0.022285330 0.023120470 0.023868414 0.026455165 0.026873581 0.027825322 0.028183914 0.029567025 0.030443880 0.031609786 0.033294903 0.033677037 0.034144083 0.035790318 0.037159323 0.037434838 0.039521856 0.040068844 0.040352238 0.041014231 0.042572522 0.044694742 0.045570777 0.047131611 0.048033485 0.049281927 0.050507320 0.051077794 0.051303000 0.051675406 0.052490179 0.052707884 0.052957870 0.053223523 0.054836035 0.054981685 0.056076697 0.056353128 0.056576706 0.057023895 0.057228427 0.059206627 0.060596274 0.061059981 0.061826419 0.062414434 0.063417972 0.064535697 0.065319332 0.066003815 0.066615873 0.068406509 0.069150358 0.070280771 0.072763765 0.074418683 0.074804992 0.076527586 0.078934681 0.084433601 0.086938747 0.087164696 0.087633971 0.089568161 0.090663915 0.091485662 0.094243184 0.094997853 0.095848855 0.096486161 0.097866055 0.098838626 0.100224804 0.100784301 0.101651525 0.102652628 0.103228213 0.103773097 0.104485811 0.104868018 0.106349209 0.107038243 0.108186438 0.110015761 0.111170706 0.112452017 0.113560835 0.115093399 0.116278734 0.116833582 0.118760265 0.121337999 0.122471127 0.123736327 0.125193916 0.126224857 0.126335658 0.126759305 0.127583620 0.132128204 0.135111120 0.135871879 0.142935985 0.143932650 0.147093082 0.147596856 0.149763989 0.152042016 0.154704854 0.155115691 0.156675146 0.161388236 0.161996126 0.173770621 0.174379416 0.181827636 0.185209874 0.186473570 0.189647481 0.190452394 0.194334972 0.195645055 0.198858045 0.200360499 0.205255012 0.207145931 0.207437156 0.210282918 0.216561949 0.217094090 0.217967290 0.219923164 0.220893592 0.225393777 0.226740534 0.232393692 0.235184737 0.235715394 0.236089788 0.244743278 0.256131075 0.257317362 0.264002569 0.269981844 0.280772432 0.283495629 0.286360352 0.291980880 0.297040924 0.304489340 0.305994909 0.307317597 0.314489784 0.316822633 0.317424361 0.322243915 0.330145219 0.332932581 0.351840762 0.352952616 0.355090575 0.355947753 0.360095383 0.363065866 0.364564281 0.384112169 0.386094170 0.392248761 0.410580162 0.426048556 0.431251755 0.462475406 0.469198715 0.479052248 0.484493967 0.484620852 0.487569172 0.491494012 0.509684683 0.515578393 0.535389332 0.569310977 0.575340328 0.591598371 0.594225358 0.607350453 0.608473206 0.644965191 0.647858748 0.649765020 0.674430222 0.678452340 0.687336903 0.692907882 0.693705618 0.700196057 0.704797562 0.718490686 0.742274309 0.751437723 0.759457443 0.772043064 0.774495441 0.779667186 0.811013307 0.816453944 0.820150810 0.823118640 0.823711833 0.832221232 0.835022412 0.837876527 0.842603801 0.845955888 0.847668386 0.850222051 0.859582736 0.865951945 0.868740339 0.874693042 0.886179382 0.887653267 0.889781388 0.900808356 0.901119500 0.904184991 0.924097781 0.928131697 0.936580568 0.937934446 0.966379818 0.976437699 0.987314790 1.001749564 1.020280909 1.028719695 1.042529601 1.052004376 1.058252242 1.068888883 1.086997966 1.088905359 1.105114597 1.109135154 1.112787313 1.127579772 1.136269778 1.141150777 1.145130599 1.176546351 1.179157394 1.181815232 1.187330840 1.191630903 1.198298818 1.224754868 1.228931883 1.274787169 1.302809334 1.321403183 1.328436425 1.333284162 1.336601048 1.338078842 1.342197422 1.344017491 1.345135166 1.359778448 1.379625659 1.383337726 1.385773454 1.409862530 1.420731478 1.431606829 1.551510263 1.686019370 1.776290981</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">293</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33651437" y3="0.06351624" z3="-0.19632551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38312455" y3="0.16507071" z3="0.41421079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64664876" y3="0.443499" z3="-0.34580525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73609942" y3="1.24573345" z3="-2.27083316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38854318" y3="0.45179714" z3="-1.19020236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73706439" y3="0.861235" z3="-3.67237896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.646957" y3="1.76053824" z3="-3.14902169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40276875" y3="2.60860985" z3="-4.63960746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57312818" y3="1.2684605" z3="-4.38920177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52655078" y3="2.94630256" z3="-5.20174383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92430585" y3="-0.46893035" z3="-3.44478862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09549987" y3="0.07162316" z3="-1.00759631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3954884" y3="-1.07368331" z3="-2.00303949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92425066" y3="-0.93824148" z3="-1.83259728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09433171" y3="-2.39942198" z3="-1.84287074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14271158" y3="-3.62783092" z3="0.68877933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01093809" y3="-5.22614663" z3="-4.74075298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23925473" y3="-4.97919702" z3="-3.70036379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83840611" y3="-4.31400137" z3="-1.0745786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78274166" y3="-4.56277734" z3="-2.84911919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55304721" y3="-5.089025" z3="-3.23883994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85342768" y3="-4.75189799" z3="-1.92141896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49527248" y3="-4.24452448" z3="-1.52009793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81228223" y3="-4.46336439" z3="-3.19856349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34891208" y3="-5.40974011" z3="-3.91380817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88747782" y3="-4.80883031" z3="-1.5746372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03033609" y3="-3.87409032" z3="0.24875884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17238336" y3="-3.66637849" z3="0.89243547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05763566" y3="-4.13271571" z3="0.45756178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16942949" y3="-3.53200868" z3="2.35946156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23056887" y3="-3.3471887" z3="5.15715762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36466811" y3="-3.74484672" z3="3.06170798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00459904" y3="-3.23297227" z3="3.08208769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03254431" y3="-3.14083551" z3="4.47057755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39412597" y3="-3.65489195" z3="4.45060432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27797641" y3="-3.99035283" z3="2.5125679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04541962" y3="-3.09336272" z3="2.5782349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10474834" y3="-2.92783277" z3="5.0094459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33115504" y3="-3.83253881" z3="4.98503398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25192349" y3="-3.28328661" z3="6.24867373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41199515" y3="-3.87018117" z3="-0.61715304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16912229" y3="-3.3632879" z3="-1.07108675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52813334" y3="0.26526366" z3="-4.71987478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08623668" y3="-1.74513268" z3="0.03221737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92030294" y3="-0.99498782" z3="1.19566737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86410855" y3="-0.33843277" z3="1.5350757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.39283469" y3="0.54079347" z3="1.233724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4863453" y3="1.45309501" z3="-0.38498583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96687483" y3="-0.70968374" z3="1.3916145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3740751" y3="1.72004177" z3="2.68907651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89921169" y3="-0.99252901" z3="2.08902861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.68097059" y3="-0.37769704" z3="3.34888588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23791054" y3="0.77311786" z3="-1.21782691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.27596081" y3="2.25452778" z3="-0.37481306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.47343485" y3="1.92295576" z3="-0.54103655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00799676" y3="-1.0782411" z3="2.42999838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93510724" y3="-0.24022875" z3="1.14637203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84101408" y3="-1.54989172" z3="0.68949601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42420044" y3="1.17148173" z3="3.64637486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56168339" y3="2.30830957" z3="2.68761367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2172412" y3="2.43252363" z3="2.65070623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81893041" y3="-0.82924862" z3="3.86566074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59793853" y3="-0.5574087" z3="3.9255434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51609206" y3="0.70580048" z3="3.22990994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83150971" y3="-0.6900065" z3="0.98638822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41167274" y3="-2.01915183" z3="0.84985465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75902976" y3="-2.66543779" z3="1.89239372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54312856" y3="-1.96951687" z3="3.07818461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01406402" y3="-0.67418757" z3="3.27103078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66655741" y3="-0.04138165" z3="2.21765032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5232036" y3="-2.51943048" z3="-0.11324904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36815203" y3="-3.67626206" z3="1.77057098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68205736" y3="-2.57073519" z3="4.10164347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82651608" y3="-0.16247828" z3="4.21588694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00520235" y3="0.99226798" z3="2.33193445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78517621" y3="0.48876298" z3="-4.2854632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76720969" y3="-0.47883563" z3="-4.45178177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42582792" y3="-1.6730846" z3="-5.07604197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1437983" y3="-1.90669912" z3="-5.56427977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83151747" y3="-0.93607448" z3="-5.37498537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02418271" y3="1.41412232" z3="-3.75491297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78256896" y3="-0.33079275" z3="-4.08288043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43986239" y3="-2.7218196" z3="-5.20508624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08131336" y3="-2.84892259" z3="-6.06416436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85048398" y3="-1.12401294" z3="-5.71779332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34723457" y3="-1.8761266" z3="5.04104765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31053912" y3="-3.71407673" z3="3.93473066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22295716" y3="-3.62731101" z3="-5.98156252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43787145" y3="-2.63190324" z3="-4.5174047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07816393" y3="1.15753561" z3="-1.49663718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12190665" y3="1.54995203" z3="-2.4781388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.45013425" y3="1.47395656" z3="-1.69428103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86736361" y3="2.1294856" z3="-2.82648753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17294366" y3="1.17355429" z3="-0.92934165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92618296" y3="2.36105736" z3="-2.97078689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58954494" y3="2.20949293" z3="-3.64886054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92409264" y3="2.49060799" z3="-3.818295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87175953" y3="2.48413597" z3="-4.42528598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.26109335" y3="2.99116463" z3="-4.73038693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42642866" y3="3.16450441" z3="-3.35702192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31573843" y3="3.57909425" z3="-4.14976679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.24050071" y3="4.17426603" z3="-2.76964987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="4.00148472" y3="5.50701779" z3="-3.00590364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06518595" y3="3.88446809" z3="-2.11662827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.64346193" y3="6.26175281" z3="-2.54224298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.10214787" y3="4.96529867" z3="-4.38693588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92990561" y3="5.91196015" z3="-3.83666719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2543583" y3="5.26463417" z3="-5.01097661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.75525428" y3="6.97502426" z3="-4.02425224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48038729" y3="-2.23039391" z3="-0.29343738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44301273" y3="-3.02005493" z3="-1.06295223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00970141" y3="-2.61858773" z3="0.59166113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09874768" y3="-1.41321408" z3="-0.71098881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17993113" y3="-1.44073941" z3="-1.13426172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32161687" y3="-0.40036735" z3="-1.47961744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10357983" y3="-1.56066846" z3="-0.92635034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41467649" y3="-2.09360775" z3="-1.98855128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3365,.0635,-.1963;7.3831,.1651,.4142;6.6466,.4435,-.3458;4.7361,1.2457,-2.2708;4.3885,.4518,-1.1902;2.7371,.8612,-3.6724;3.647,1.7605,-3.149;1.4028,2.6086,-4.6396;1.5731,1.2685,-4.3892;.5266,2.9463,-5.2017;2.9243,-.4689,-3.4448;3.0955,.0716,-1.0076;2.3955,-1.0737,-2.003;.9243,-.9382,-1.8326;3.0943,-2.3994,-1.8429;-.1427,-3.6278,.6888;-.0109,-5.2261,-4.7408;-.2393,-4.9792,-3.7004;-.8384,-4.314,-1.0746;.7827,-4.5628,-2.8491;-1.553,-5.089,-3.2388;-1.8534,-4.7519,-1.9214;.4953,-4.2445,-1.5201;1.8123,-4.4634,-3.1986;-2.3489,-5.4097,-3.9138;-2.8875,-4.8088,-1.5746;-1.0303,-3.8741,.2488;-2.1724,-3.6664,.8924;-3.0576,-4.1327,.4576;-2.1694,-3.532,2.3595;-2.2306,-3.3472,5.1572;-3.3647,-3.7448,3.0617;-1.0046,-3.233,3.0821;-1.0325,-3.1408,4.4706;-3.3941,-3.6549,4.4506;-4.278,-3.9904,2.5126;-.0454,-3.0934,2.5782;-.1047,-2.9278,5.0094;-4.3312,-3.8325,4.985;-2.2519,-3.2833,6.2487;1.412,-3.8702,-.6172;2.1691,-3.3633,-1.0711;.5281,.2653,-4.7199;-3.0862,-1.7451,.0322;-2.9203,-.995,1.1957;-1.8641,-.3384,1.5351;-.3928,.5408,1.2337;-.4863,1.4531,-.385;.9669,-.7097,1.3916;-.3741,1.72,2.6891;-3.8992,-.9925,2.089;-3.681,-.3777,3.3489;-.2379,.7731,-1.2178;.276,2.2545,-.3748;-1.4734,1.923,-.541;1.008,-1.0782,2.43;1.9351,-.2402,1.1464;.841,-1.5499,.6895;-.4242,1.1715,3.6464;.5617,2.3083,2.6876;-1.2172,2.4325,2.6507;-2.8189,-.8292,3.8657;-4.5979,-.5574,3.9255;-3.5161,.7058,3.2299;4.8315,-.69,.9864;4.4117,-2.0192,.8499;3.759,-2.6654,1.8924;3.5431,-1.9695,3.0782;4.0141,-.6742,3.271;4.6666,-.0414,2.2177;4.5232,-2.5194,-.1132;3.3682,-3.6763,1.7706;2.6821,-2.5707,4.1016;3.8265,-.1625,4.2159;5.0052,.9923,2.3319;-.7852,.4888,-4.2855;-1.7672,-.4788,-4.4518;-1.4258,-1.6731,-5.076;-.1438,-1.9067,-5.5643;.8315,-.9361,-5.375;-1.0242,1.4141,-3.7549;-2.7826,-.3308,-4.0829;-2.4399,-2.7218,-5.2051;.0813,-2.8489,-6.0642;1.8505,-1.124,-5.7178;2.3472,-1.8761,5.041;2.3105,-3.7141,3.9347;-2.223,-3.6273,-5.9816;-3.4379,-2.6319,-4.5174;7.0782,1.1575,-1.4966;6.1219,1.55,-2.4781;8.4501,1.474,-1.6943;8.8674,2.1295,-2.8265;9.1729,1.1736,-.9293;9.9262,2.3611,-2.9708;6.5895,2.2095,-3.6489;7.9241,2.4906,-3.8183;5.8718,2.4841,-4.4253;8.2611,2.9912,-4.7304;3.4264,3.1645,-3.357;2.3157,3.5791,-4.1498;4.2405,4.1743,-2.7696;4.0015,5.507,-3.0059;5.0652,3.8845,-2.1166;4.6435,6.2618,-2.5422;2.1021,4.9653,-4.3869;2.9299,5.912,-3.8367;1.2544,5.2646,-5.011;2.7553,6.975,-4.0243;-4.4804,-2.2304,-.2934;-4.443,-3.0201,-1.063;-5.0097,-2.6186,.5917;-5.0987,-1.4132,-.711;-2.1799,-1.4407,-1.1343;-2.3216,-.4004,-1.4796;-1.1036,-1.5607,-.9264;-2.4147,-2.0936,-1.9886;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650412421435</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001883252997 0.000234324322 0.022598474805 0.005329655434</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030718719 -0.000205428 0.000035522 0.000175957 0.000204100 0.000339598 0.000393238 0.000505281 0.000604219 0.000838279 0.000939356 0.001065042 0.001214659 0.001341497 0.001412951 0.001470506 0.001547123 0.001726167 0.001797097 0.001908090 0.002131967 0.002337436 0.002422533 0.002509714 0.002684688 0.003037314 0.003067091 0.003245520 0.003542911 0.003865671 0.004457862 0.004702158 0.004761418 0.005118132 0.006018614 0.006077973 0.006328381 0.006663737 0.006957459 0.007664800 0.008112563 0.008161751 0.008412897 0.009424335 0.009933388 0.010105080 0.010259324 0.011161479 0.011939772 0.012205219 0.013006929 0.013111088 0.014230683 0.014830370 0.015389598 0.015694435 0.015973461 0.016665153 0.016780030 0.017516158 0.018218919 0.018759726 0.019392940 0.019620594 0.020214051 0.020728099 0.021244403 0.021429801 0.022285411 0.023120497 0.023869329 0.026466587 0.026875345 0.027830050 0.028184818 0.029567144 0.030444568 0.031610158 0.033295305 0.033681752 0.034145065 0.035790355 0.037159556 0.037438699 0.039521478 0.040068752 0.040352324 0.041030234 0.042572841 0.044697110 0.045577957 0.047134474 0.048034244 0.049282188 0.050507504 0.051077755 0.051303085 0.051680405 0.052490475 0.052715870 0.052958250 0.053224321 0.054837170 0.054982367 0.056086017 0.056353555 0.056576747 0.057025711 0.057229250 0.059207211 0.060598485 0.061059970 0.061830413 0.062414478 0.063418142 0.064535894 0.065320249 0.066004755 0.066616523 0.068407085 0.069153313 0.070281439 0.072770069 0.074423631 0.074805156 0.076527810 0.078975428 0.084443797 0.086940395 0.087168614 0.087636267 0.089586240 0.090666331 0.091486856 0.094247993 0.094998216 0.095849210 0.096487672 0.097866470 0.098840172 0.100224754 0.100786161 0.101792582 0.102673052 0.103228463 0.103776889 0.104487468 0.104871334 0.106350163 0.107041566 0.108189590 0.110015800 0.111171091 0.112456870 0.113561397 0.115094327 0.116279259 0.116834381 0.118760314 0.121337898 0.122472944 0.123736506 0.125200483 0.126226244 0.126335966 0.126763711 0.127586583 0.132129743 0.135111519 0.135872009 0.142972812 0.143946459 0.147093619 0.147603934 0.149764123 0.152043717 0.154705075 0.155118128 0.156675784 0.161388853 0.161997202 0.173771015 0.174395666 0.181827578 0.185209944 0.186473579 0.189648696 0.190452157 0.194357327 0.195660266 0.198870544 0.200364861 0.205255607 0.207148399 0.207437259 0.210283018 0.216573201 0.217107226 0.217967907 0.219923161 0.220893764 0.225395087 0.226740571 0.232395630 0.235185177 0.235715393 0.236089973 0.244744765 0.256131541 0.257323088 0.264005131 0.269982027 0.280773171 0.283498345 0.286360685 0.291980919 0.297041067 0.304491719 0.305997901 0.307318569 0.314493442 0.316826812 0.317431958 0.322246610 0.330148031 0.332933609 0.351843492 0.352960543 0.355092769 0.355952567 0.360095624 0.363073127 0.364571088 0.384127343 0.386097939 0.392249116 0.410580224 0.426056483 0.431254974 0.462481852 0.469198765 0.479056011 0.484512748 0.484621004 0.487570351 0.491494013 0.509684849 0.515578536 0.535390686 0.569313203 0.575353470 0.591601141 0.594231501 0.607350648 0.608473216 0.644965364 0.647858735 0.649766048 0.674430222 0.678452606 0.687445738 0.692959490 0.693718006 0.700219504 0.704799447 0.718490838 0.742275373 0.751439429 0.759458457 0.772056862 0.774531472 0.779673046 0.811013920 0.816454464 0.820150737 0.823120227 0.823712068 0.832228282 0.835025368 0.837878689 0.842609078 0.845956320 0.847668660 0.850222150 0.859609381 0.865952023 0.868749930 0.874693808 0.886183124 0.887661954 0.889781425 0.900810702 0.901120014 0.904189987 0.924097775 0.928145071 0.936583603 0.937956494 0.966381547 0.976447251 0.987339017 1.001752577 1.020291555 1.028729238 1.042533985 1.052019003 1.058258132 1.068891872 1.086999206 1.088919796 1.105132560 1.109409361 1.112787743 1.127597153 1.136287416 1.141150928 1.145132062 1.176564004 1.179162351 1.181816627 1.187341221 1.191631971 1.198326684 1.224755214 1.228951877 1.274795667 1.302813987 1.321407857 1.328436689 1.333284155 1.336600935 1.338081194 1.342216007 1.344028318 1.345139918 1.359788345 1.379640227 1.383344080 1.385774902 1.409873587 1.420794680 1.431626779 1.551510251 1.686120499 1.776317834</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">294</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33348204" y3="0.06754239" z3="-0.19324028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37876157" y3="0.17315216" z3="0.42017716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64289901" y3="0.44968669" z3="-0.34112116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73401905" y3="1.24837833" z3="-2.26912025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38613583" y3="0.45395899" z3="-1.18847229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73784713" y3="0.85894431" z3="-3.67419243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64552363" y3="1.76065129" z3="-3.14973017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.40420985" y3="2.60379415" z3="-4.64776322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57499225" y3="1.26378267" z3="-4.39436209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52892851" y3="2.93933249" z3="-5.2127655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92618705" y3="-0.47076892" z3="-3.44433207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09333639" y3="0.0720509" z3="-1.00696585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39459424" y3="-1.07396751" z3="-2.00273515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92303379" y3="-0.93782745" z3="-1.83491507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.0927523" y3="-2.3997159" z3="-1.83985756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1464881" y3="-3.62327615" z3="0.686329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01127013" y3="-5.23023572" z3="-4.73968872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24065334" y3="-4.9808526" z3="-3.70025793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84013129" y3="-4.31222765" z3="-1.07617587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7809923" y3="-4.56476759" z3="-2.84866185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55402837" y3="-5.08897903" z3="-3.24018622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85453382" y3="-4.74969375" z3="-1.92342208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49336016" y3="-4.24453147" z3="-1.52031502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81254427" y3="-4.47122059" z3="-3.197668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3514758" y3="-5.40669914" z3="-3.91603172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88999049" y3="-4.80197852" z3="-1.57747389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03233679" y3="-3.87234132" z3="0.24710045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17432695" y3="-3.66385054" z3="0.8908243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06022295" y3="-4.12804192" z3="0.45503451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17145258" y3="-3.53205197" z3="2.35818729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23350232" y3="-3.35199152" z3="5.1563203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36798209" y3="-3.74128197" z3="3.05969742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00584112" y3="-3.23941444" z3="3.08190195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03397651" y3="-3.14998572" z3="4.4706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39812915" y3="-3.65337178" z3="4.44864614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28147242" y3="-3.98291281" z3="2.50994089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04595156" y3="-3.10303868" z3="2.57913523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1057539" y3="-2.94167591" z3="5.01006071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33669829" y3="-3.82733517" z3="4.98231059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25539834" y3="-3.28985721" z3="6.24789852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41062905" y3="-3.87212359" z3="-0.61672083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1672926" y3="-3.36435095" z3="-1.06981111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.529901" y3="0.26051975" z3="-4.72316939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.086393" y3="-1.73887782" z3="0.03461297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91892586" y3="-0.98986609" z3="1.19866512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.86320682" y3="-0.33263007" z3="1.53764399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38678439" y3="0.53777453" z3="1.23593843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47798136" y3="1.45499642" z3="-0.37985776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.96621454" y3="-0.72032429" z3="1.38766005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35659356" y3="1.71239422" z3="2.69518759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89675371" y3="-0.98814028" z3="2.09340649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67614134" y3="-0.37502405" z3="3.35387099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23796677" y3="0.77560814" z3="-1.21577373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.2913575" y3="2.24945438" z3="-0.36972033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.46135902" y3="1.9343468" z3="-0.53105394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00510963" y3="-1.09476919" z3="2.42403763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.93601912" y3="-0.25272845" z3="1.14609253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.83794976" y3="-1.55564858" z3="0.68041838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40828349" y3="1.16094798" z3="3.65070745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58352547" y3="2.29380234" z3="2.69348493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19464273" y3="2.43124521" z3="2.66160512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81268108" y3="-0.82632469" z3="3.86816577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59170371" y3="-0.55607892" z3="3.93271855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51210237" y3="0.70850566" z3="3.23591715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8293433" y3="-0.68778677" z3="0.98877419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41369401" y3="-2.01820203" z3="0.85096584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76144384" y3="-2.66706774" z3="1.89204532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54226522" y3="-1.97263152" z3="3.07790759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.00949196" y3="-0.67605078" z3="3.27231701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66085897" y3="-0.04045144" z3="2.21993398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52643124" y3="-2.51724419" z3="-0.11319919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37261382" y3="-3.67879246" z3="1.7684614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68191325" y3="-2.57699196" z3="4.10017111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.81886678" y3="-0.16550048" z3="4.21667894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.9949988" y3="0.99426022" z3="2.33434562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7832817" y3="0.48531578" z3="-4.28872164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76615578" y3="-0.48152015" z3="-4.45401788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42560429" y3="-1.67655083" z3="-5.07722632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14357552" y3="-1.91160159" z3="-5.56447641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8325157" y3="-0.94176281" z3="-5.37668088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02169115" y3="1.41142095" z3="-3.75922995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78165994" y3="-0.33236807" z3="-4.08594197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44069402" y3="-2.72441426" z3="-5.20575855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08080422" y3="-2.85448271" z3="-6.06331325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85119326" y3="-1.13097644" z3="-5.7191771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34997745" y3="-1.8861313" z3="5.04397649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30973247" y3="-3.71919039" z3="3.92964008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22508113" y3="-3.6295422" z3="-5.98317442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43807068" y3="-2.63399913" z3="-4.5178256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07475803" y3="1.1643117" z3="-1.49152593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1195617" y3="1.55466327" z3="-2.4747311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44619451" y3="1.48364998" z3="-1.68680119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86408669" y3="2.14064913" z3="-2.8182089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1679919" y3="1.18486366" z3="-0.9203913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9226663" y3="2.37595897" z3="-2.96023723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5880396" y3="2.21478513" z3="-3.64504605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.92203058" y3="2.49932852" z3="-3.81195411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87127665" y3="2.48738054" z3="-4.42307503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25961426" y3="3.00110576" z3="-4.72340683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4243686" y3="3.16398545" z3="-3.36136429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.31561869" y3="3.57593559" z3="-4.15827437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23645087" y3="4.17542237" z3="-2.77468524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99700079" y3="5.50771609" z3="-3.01447414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05987586" y3="3.88749347" z3="-2.11917183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63759782" y3="6.26353872" z3="-2.55139518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.10258051" y3="4.96080208" z3="-4.40053207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92765531" y3="5.90994658" z3="-3.84944352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.25646513" y3="5.25790713" z3="-5.02794228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.75268721" y3="6.97258321" z3="-4.04000624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48153813" y3="-2.22167707" z3="-0.2907129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44577768" y3="-3.01104333" z3="-1.06076942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01145855" y3="-2.60957967" z3="0.59407201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09839455" y3="-1.40283654" z3="-0.70724163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18066221" y3="-1.43448099" z3="-1.13216848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31987252" y3="-0.39283355" z3="-1.47608078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10442311" y3="-1.55679698" z3="-0.92502183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41652357" y3="-2.08594035" z3="-1.98665993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3335,.0675,-.1932;7.3788,.1732,.4202;6.6429,.4497,-.3411;4.734,1.2484,-2.2691;4.3861,.454,-1.1885;2.7378,.8589,-3.6742;3.6455,1.7607,-3.1497;1.4042,2.6038,-4.6478;1.575,1.2638,-4.3944;.5289,2.9393,-5.2128;2.9262,-.4708,-3.4443;3.0933,.0721,-1.007;2.3946,-1.074,-2.0027;.923,-.9378,-1.8349;3.0928,-2.3997,-1.8399;-.1465,-3.6233,.6863;-.0113,-5.2302,-4.7397;-.2407,-4.9809,-3.7003;-.8401,-4.3122,-1.0762;.781,-4.5648,-2.8487;-1.554,-5.089,-3.2402;-1.8545,-4.7497,-1.9234;.4934,-4.2445,-1.5203;1.8125,-4.4712,-3.1977;-2.3515,-5.4067,-3.916;-2.89,-4.802,-1.5775;-1.0323,-3.8723,.2471;-2.1743,-3.6639,.8908;-3.0602,-4.128,.455;-2.1715,-3.5321,2.3582;-2.2335,-3.352,5.1563;-3.368,-3.7413,3.0597;-1.0058,-3.2394,3.0819;-1.034,-3.15,4.4706;-3.3981,-3.6534,4.4486;-4.2815,-3.9829,2.5099;-.046,-3.103,2.5791;-.1058,-2.9417,5.0101;-4.3367,-3.8273,4.9823;-2.2554,-3.2899,6.2479;1.4106,-3.8721,-.6167;2.1673,-3.3644,-1.0698;.5299,.2605,-4.7232;-3.0864,-1.7389,.0346;-2.9189,-.9899,1.1987;-1.8632,-.3326,1.5376;-.3868,.5378,1.2359;-.478,1.455,-.3799;.9662,-.7203,1.3877;-.3566,1.7124,2.6952;-3.8968,-.9881,2.0934;-3.6761,-.375,3.3539;-.238,.7756,-1.2158;.2914,2.2495,-.3697;-1.4614,1.9343,-.5311;1.0051,-1.0948,2.424;1.936,-.2527,1.1461;.8379,-1.5556,.6804;-.4083,1.1609,3.6507;.5835,2.2938,2.6935;-1.1946,2.4312,2.6616;-2.8127,-.8263,3.8682;-4.5917,-.5561,3.9327;-3.5121,.7085,3.2359;4.8293,-.6878,.9888;4.4137,-2.0182,.851;3.7614,-2.6671,1.892;3.5423,-1.9726,3.0779;4.0095,-.6761,3.2723;4.6609,-.0405,2.2199;4.5264,-2.5172,-.1132;3.3726,-3.6788,1.7685;2.6819,-2.577,4.1002;3.8189,-.1655,4.2167;4.995,.9943,2.3343;-.7833,.4853,-4.2887;-1.7662,-.4815,-4.454;-1.4256,-1.6766,-5.0772;-.1436,-1.9116,-5.5645;.8325,-.9418,-5.3767;-1.0217,1.4114,-3.7592;-2.7817,-.3324,-4.0859;-2.4407,-2.7244,-5.2058;.0808,-2.8545,-6.0633;1.8512,-1.131,-5.7192;2.35,-1.8861,5.044;2.3097,-3.7192,3.9296;-2.2251,-3.6295,-5.9832;-3.4381,-2.634,-4.5178;7.0748,1.1643,-1.4915;6.1196,1.5547,-2.4747;8.4462,1.4836,-1.6868;8.8641,2.1406,-2.8182;9.168,1.1849,-.9204;9.9227,2.376,-2.9602;6.588,2.2148,-3.645;7.922,2.4993,-3.812;5.8713,2.4874,-4.4231;8.2596,3.0011,-4.7234;3.4244,3.164,-3.3614;2.3156,3.5759,-4.1583;4.2365,4.1754,-2.7747;3.997,5.5077,-3.0145;5.0599,3.8875,-2.1192;4.6376,6.2635,-2.5514;2.1026,4.9608,-4.4005;2.9277,5.9099,-3.8494;1.2565,5.2579,-5.0279;2.7527,6.9726,-4.04;-4.4815,-2.2217,-.2907;-4.4458,-3.011,-1.0608;-5.0115,-2.6096,.5941;-5.0984,-1.4028,-.7072;-2.1807,-1.4345,-1.1322;-2.3199,-.3928,-1.4761;-1.1044,-1.5568,-.925;-2.4165,-2.0859,-1.9867;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650413315323</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001443661430 0.000182958034 0.020063384415 0.005341559064</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030719456 -0.000244211 0.000084882 0.000163195 0.000204213 0.000337877 0.000395545 0.000502750 0.000604210 0.000838053 0.000940428 0.001067299 0.001214627 0.001343528 0.001412494 0.001472685 0.001544252 0.001726122 0.001798070 0.001907653 0.002129371 0.002336620 0.002423264 0.002509671 0.002687860 0.003040495 0.003067770 0.003244617 0.003542497 0.003866114 0.004457149 0.004704774 0.004761444 0.005118839 0.006020659 0.006079556 0.006328258 0.006664590 0.006959324 0.007665266 0.008112428 0.008162556 0.008414385 0.009425466 0.009933168 0.010105351 0.010263199 0.011162051 0.011940939 0.012208079 0.013011628 0.013111035 0.014230698 0.014838183 0.015389529 0.015695335 0.015974891 0.016669985 0.016780100 0.017516129 0.018222598 0.018765791 0.019392741 0.019621161 0.020216222 0.020730183 0.021244743 0.021429390 0.022285767 0.023120489 0.023871126 0.026470994 0.026878335 0.027835253 0.028186910 0.029568094 0.030445219 0.031612045 0.033296511 0.033687578 0.034145835 0.035790573 0.037160479 0.037441539 0.039521659 0.040072270 0.040352468 0.041033504 0.042573436 0.044698397 0.045585693 0.047136863 0.048034157 0.049282534 0.050507420 0.051078165 0.051303114 0.051682125 0.052490518 0.052722539 0.052958364 0.053225017 0.054836956 0.054982799 0.056093799 0.056353973 0.056576755 0.057027209 0.057230162 0.059209562 0.060600783 0.061060061 0.061833726 0.062414947 0.063418091 0.064536233 0.065320352 0.066005288 0.066617067 0.068407257 0.069157628 0.070282129 0.072773642 0.074428351 0.074805148 0.076528926 0.078997757 0.084450345 0.086941044 0.087172588 0.087638362 0.089601124 0.090668875 0.091487334 0.094251213 0.094998773 0.095849684 0.096488646 0.097866892 0.098841937 0.100225000 0.100788565 0.101862830 0.102697075 0.103228387 0.103778772 0.104488628 0.104874631 0.106351463 0.107042722 0.108192758 0.110015864 0.111171586 0.112462954 0.113562823 0.115095087 0.116279357 0.116835852 0.118760309 0.121337913 0.122473831 0.123736736 0.125207664 0.126228990 0.126336255 0.126765450 0.127590660 0.132132138 0.135110845 0.135871798 0.143004885 0.143952644 0.147093721 0.147611523 0.149764896 0.152043512 0.154705399 0.155121574 0.156676068 0.161390007 0.161997163 0.173772193 0.174400057 0.181827495 0.185210087 0.186473690 0.189652381 0.190451378 0.194369026 0.195671958 0.198879881 0.200368219 0.205254539 0.207150028 0.207437178 0.210283097 0.216578093 0.217110841 0.217967920 0.219924194 0.220894305 0.225397200 0.226740599 0.232396618 0.235185149 0.235715612 0.236090017 0.244745445 0.256131775 0.257326831 0.264005591 0.269982097 0.280775141 0.283502491 0.286361018 0.291980955 0.297041145 0.304491576 0.305999635 0.307321015 0.314497702 0.316828387 0.317436420 0.322250166 0.330150389 0.332933698 0.351843627 0.352970808 0.355095341 0.355954874 0.360097089 0.363076247 0.364572691 0.384135171 0.386098309 0.392249222 0.410580404 0.426059887 0.431254873 0.462483880 0.469199764 0.479059864 0.484527512 0.484622164 0.487570804 0.491494092 0.509684833 0.515579872 0.535393632 0.569314980 0.575358906 0.591605651 0.594232584 0.607350656 0.608472772 0.644965431 0.647858712 0.649765984 0.674431668 0.678452643 0.687509764 0.693001693 0.693722514 0.700234802 0.704801996 0.718490767 0.742275637 0.751439782 0.759459064 0.772059215 0.774544766 0.779678822 0.811014802 0.816454744 0.820152044 0.823121278 0.823718527 0.832230899 0.835029292 0.837880612 0.842611745 0.845956289 0.847668507 0.850222160 0.859629339 0.865952034 0.868757229 0.874693939 0.886184450 0.887673418 0.889781427 0.900812528 0.901123433 0.904190168 0.924097823 0.928156875 0.936584234 0.937970038 0.966382103 0.976455342 0.987348845 1.001754523 1.020297630 1.028738080 1.042539917 1.052037608 1.058264039 1.068900390 1.086999667 1.088927229 1.105149703 1.109584450 1.112787818 1.127598700 1.136296964 1.141152497 1.145133633 1.176572579 1.179166381 1.181819206 1.187345811 1.191632841 1.198349787 1.224756345 1.228965229 1.274799604 1.302818091 1.321411677 1.328436723 1.333284012 1.336600761 1.338096248 1.342216069 1.344032427 1.345141699 1.359803220 1.379662821 1.383353309 1.385779308 1.409874104 1.420818211 1.431634814 1.551510808 1.686181914 1.776324576</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">295</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33367506" y3="0.06709767" z3="-0.19023793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37884873" y3="0.17801999" z3="0.42333492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64231581" y3="0.45273038" z3="-0.33797463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73119781" y3="1.24565629" z3="-2.26634183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38533829" y3="0.45102503" z3="-1.18554706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73483025" y3="0.85353249" z3="-3.66998446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64157984" y3="1.75606996" z3="-3.14650025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39851034" y3="2.59598679" z3="-4.64328665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57120977" y3="1.25673785" z3="-4.38949261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5227166" y3="2.93042557" z3="-5.20802043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92508468" y3="-0.47591887" z3="-3.44064131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09347786" y3="0.0664534" z3="-1.00364924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39586024" y3="-1.08056539" z3="-1.99899464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92431275" y3="-0.94643369" z3="-1.82977255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09564443" y3="-2.40556756" z3="-1.83740808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14615982" y3="-3.62348139" z3="0.68127651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01202527" y3="-5.23482406" z3="-4.74349179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24144104" y3="-4.98315584" z3="-3.70447507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84286242" y3="-4.30753382" z3="-1.081937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7810771" y3="-4.5711506" z3="-2.85159216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5569941" y3="-5.08305873" z3="-3.24617376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85862048" y3="-4.74019612" z3="-1.93052992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49240112" y3="-4.24796604" z3="-1.52411794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81255837" y3="-4.48059884" z3="-3.19843313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35310165" y3="-5.40072713" z3="-3.92224735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89418029" y3="-4.78866876" z3="-1.58657177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03446023" y3="-3.86607661" z3="0.24086399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17566764" y3="-3.65721876" z3="0.88546485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06211759" y3="-4.11984112" z3="0.44928643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17184512" y3="-3.52774887" z3="2.35299844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23124614" y3="-3.35314139" z3="5.15151328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36819048" y3="-3.73596842" z3="3.05482932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00499728" y3="-3.23894924" z3="3.07652673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03209775" y3="-3.15174403" z3="4.46537543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39683828" y3="-3.65097994" z3="4.44407121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28318982" y3="-3.97381966" z3="2.50508154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04479487" y3="-3.10430518" z3="2.57320493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10284676" y3="-2.94656812" z3="5.00475006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33487241" y3="-3.82484019" z3="4.97804082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25199023" y3="-3.29330444" z3="6.24327873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40955128" y3="-3.87901208" z3="-0.61933065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16827627" y3="-3.37229157" z3="-1.07075774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52792715" y3="0.25192222" z3="-4.72035539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0854899" y3="-1.7300165" z3="0.03308165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91469868" y3="-0.98245011" z3="1.19758124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85673522" y3="-0.32790153" z3="1.53524137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37909892" y3="0.54117176" z3="1.23667094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46384187" y3="1.45758128" z3="-0.37999679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97136422" y3="-0.71900253" z3="1.39271865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35159477" y3="1.71669601" z3="2.6946652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89110788" y3="-0.97971302" z3="2.09375695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66717873" y3="-0.36978034" z3="3.35505208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22801108" y3="0.77579155" z3="-1.21492039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31142088" y3="2.24652079" z3="-0.37053486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44368786" y3="1.94364196" z3="-0.53225079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00716841" y3="-1.09225141" z3="2.42936189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94282379" y3="-0.25403884" z3="1.1520782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84248693" y3="-1.55482791" z3="0.68624267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40673294" y3="1.166176" z3="3.65058737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58908366" y3="2.2969727" z3="2.69498159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18854148" y3="2.43643645" z3="2.65783811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80429251" y3="-0.82505367" z3="3.86722448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58247063" y3="-0.54970823" z3="3.93425792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.5003711" y3="0.7137591" z3="3.23935929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83084032" y3="-0.68883282" z3="0.99186451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41584381" y3="-2.0193985" z3="0.85408781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76474974" y3="-2.66869192" z3="1.89570607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54575673" y3="-1.9745188" z3="3.08194071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01235463" y3="-0.67786978" z3="3.27617708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66314264" y3="-0.04189058" z3="2.22362226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52935733" y3="-2.51863184" z3="-0.10939348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37733357" y3="-3.6806931" z3="1.77290004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68517166" y3="-2.57901697" z3="4.10395457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82217891" y3="-0.16762389" z3="4.2211925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.99786054" y3="0.99290574" z3="2.33887731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78645461" y3="0.47633684" z3="-4.28971203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76894376" y3="-0.49019192" z3="-4.45946021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42674238" y3="-1.68434896" z3="-5.08319649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14319605" y3="-1.91946018" z3="-5.56662164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83261089" y3="-0.94994544" z3="-5.37379814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02636082" y3="1.4019746" z3="-3.76009787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78534312" y3="-0.3410627" z3="-4.09398076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44187905" y3="-2.73118692" z3="-5.21721009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08266264" y3="-2.86178371" z3="-6.06602071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85250628" y3="-1.13889346" z3="-5.71325462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3518304" y3="-1.88804456" z3="5.04651783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31261515" y3="-3.72134494" z3="3.93278166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22458927" y3="-3.63448868" z3="-5.99606502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44094275" y3="-2.64215487" z3="-4.53104563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07247302" y3="1.16810613" z3="-1.48851129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11611334" y3="1.55533052" z3="-2.47193531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44329444" y3="1.49120151" z3="-1.68379434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85941452" y3="2.1479294" z3="-2.81566542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16606989" y3="1.19491817" z3="-0.91723679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91732947" y3="2.38505126" z3="-2.95799676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58280684" y3="2.21564989" z3="-3.64255701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91622344" y3="2.50322482" z3="-3.80967048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8651858" y3="2.48592668" z3="-4.42066247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25240579" y3="3.00422015" z3="-4.72162802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41800253" y3="3.15916696" z3="-3.35761347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30828904" y3="3.56946528" z3="-4.15391074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22807918" y3="4.17228015" z3="-2.77054889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98636719" y3="5.50394942" z3="-3.01046285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05180312" y3="3.88617537" z3="-2.11471661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62540776" y3="6.2611678" z3="-2.5470547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09202882" y3="4.95451843" z3="-4.39508708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91611979" y3="5.90443916" z3="-3.8450666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24513335" y3="5.25018207" z3="-5.02206853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73941945" y3="6.96664438" z3="-4.03569183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48194747" y3="-2.20992693" z3="-0.29055279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44878748" y3="-2.99892475" z3="-1.06094148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01131873" y3="-2.59719653" z3="0.59494109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09778909" y3="-1.38990294" z3="-0.70609814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18074042" y3="-1.42664858" z3="-1.13482606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31940157" y3="-0.38513471" z3="-1.47824535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10425678" y3="-1.5508938" z3="-0.92958295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41977376" y3="-2.07740014" z3="-1.98964863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3337,.0671,-.1902;7.3788,.178,.4233;6.6423,.4527,-.338;4.7312,1.2457,-2.2663;4.3853,.451,-1.1855;2.7348,.8535,-3.67;3.6416,1.7561,-3.1465;1.3985,2.596,-4.6433;1.5712,1.2567,-4.3895;.5227,2.9304,-5.208;2.9251,-.4759,-3.4406;3.0935,.0665,-1.0036;2.3959,-1.0806,-1.999;.9243,-.9464,-1.8298;3.0956,-2.4056,-1.8374;-.1462,-3.6235,.6813;-.012,-5.2348,-4.7435;-.2414,-4.9832,-3.7045;-.8429,-4.3075,-1.0819;.7811,-4.5712,-2.8516;-1.557,-5.0831,-3.2462;-1.8586,-4.7402,-1.9305;.4924,-4.248,-1.5241;1.8126,-4.4806,-3.1984;-2.3531,-5.4007,-3.9222;-2.8942,-4.7887,-1.5866;-1.0345,-3.8661,.2409;-2.1757,-3.6572,.8855;-3.0621,-4.1198,.4493;-2.1718,-3.5277,2.353;-2.2312,-3.3531,5.1515;-3.3682,-3.736,3.0548;-1.005,-3.2389,3.0765;-1.0321,-3.1517,4.4654;-3.3968,-3.651,4.4441;-4.2832,-3.9738,2.5051;-.0448,-3.1043,2.5732;-.1028,-2.9466,5.0048;-4.3349,-3.8248,4.978;-2.252,-3.2933,6.2433;1.4096,-3.879,-.6193;2.1683,-3.3723,-1.0708;.5279,.2519,-4.7204;-3.0855,-1.73,.0331;-2.9147,-.9825,1.1976;-1.8567,-.3279,1.5352;-.3791,.5412,1.2367;-.4638,1.4576,-.38;.9714,-.719,1.3927;-.3516,1.7167,2.6947;-3.8911,-.9797,2.0938;-3.6672,-.3698,3.3551;-.228,.7758,-1.2149;.3114,2.2465,-.3705;-1.4437,1.9436,-.5323;1.0072,-1.0923,2.4294;1.9428,-.254,1.1521;.8425,-1.5548,.6862;-.4067,1.1662,3.6506;.5891,2.297,2.695;-1.1885,2.4364,2.6578;-2.8043,-.8251,3.8672;-4.5825,-.5497,3.9343;-3.5004,.7138,3.2394;4.8308,-.6888,.9919;4.4158,-2.0194,.8541;3.7647,-2.6687,1.8957;3.5458,-1.9745,3.0819;4.0124,-.6779,3.2762;4.6631,-.0419,2.2236;4.5294,-2.5186,-.1094;3.3773,-3.6807,1.7729;2.6852,-2.579,4.104;3.8222,-.1676,4.2212;4.9979,.9929,2.3389;-.7865,.4763,-4.2897;-1.7689,-.4902,-4.4595;-1.4267,-1.6843,-5.0832;-.1432,-1.9195,-5.5666;.8326,-.9499,-5.3738;-1.0264,1.402,-3.7601;-2.7853,-.3411,-4.094;-2.4419,-2.7312,-5.2172;.0827,-2.8618,-6.066;1.8525,-1.1389,-5.7133;2.3518,-1.888,5.0465;2.3126,-3.7213,3.9328;-2.2246,-3.6345,-5.9961;-3.4409,-2.6422,-4.531;7.0725,1.1681,-1.4885;6.1161,1.5553,-2.4719;8.4433,1.4912,-1.6838;8.8594,2.1479,-2.8157;9.1661,1.1949,-.9172;9.9173,2.3851,-2.958;6.5828,2.2156,-3.6426;7.9162,2.5032,-3.8097;5.8652,2.4859,-4.4207;8.2524,3.0042,-4.7216;3.418,3.1592,-3.3576;2.3083,3.5695,-4.1539;4.2281,4.1723,-2.7705;3.9864,5.5039,-3.0105;5.0518,3.8862,-2.1147;4.6254,6.2612,-2.5471;2.092,4.9545,-4.3951;2.9161,5.9044,-3.8451;1.2451,5.2502,-5.0221;2.7394,6.9666,-4.0357;-4.4819,-2.2099,-.2906;-4.4488,-2.9989,-1.0609;-5.0113,-2.5972,.5949;-5.0978,-1.3899,-.7061;-2.1807,-1.4266,-1.1348;-2.3194,-.3851,-1.4782;-1.1043,-1.5509,-.9296;-2.4198,-2.0774,-1.9896;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418478601</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001619543710 0.000200917136 0.022416496515 0.005330943145</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030720407 -0.000177114 0.000128380 0.000172712 0.000208531 0.000335457 0.000393964 0.000504700 0.000604582 0.000838770 0.000941674 0.001069560 0.001215005 0.001344427 0.001413298 0.001473851 0.001543912 0.001725635 0.001797531 0.001908138 0.002127774 0.002337840 0.002422665 0.002509729 0.002688467 0.003042785 0.003068939 0.003245002 0.003543438 0.003866671 0.004457083 0.004705938 0.004761515 0.005120875 0.006021237 0.006080166 0.006328338 0.006665593 0.006959474 0.007666438 0.008112768 0.008165272 0.008414945 0.009425687 0.009933447 0.010105136 0.010262682 0.011162357 0.011941174 0.012210203 0.013016933 0.013111116 0.014231045 0.014842410 0.015389215 0.015695954 0.015976955 0.016673527 0.016780055 0.017516012 0.018225228 0.018771193 0.019392898 0.019621898 0.020217362 0.020731417 0.021245294 0.021429337 0.022285436 0.023120437 0.023870891 0.026473718 0.026880448 0.027839584 0.028189610 0.029569666 0.030445721 0.031613411 0.033300151 0.033692705 0.034146479 0.035790491 0.037162054 0.037444415 0.039521816 0.040074504 0.040352540 0.041038105 0.042574502 0.044699883 0.045595567 0.047138402 0.048034161 0.049282947 0.050507381 0.051078603 0.051303209 0.051684149 0.052490579 0.052730057 0.052958466 0.053225882 0.054837125 0.054982974 0.056100186 0.056354685 0.056576709 0.057027662 0.057231180 0.059210825 0.060602533 0.061060462 0.061836304 0.062415198 0.063418077 0.064536463 0.065320384 0.066005563 0.066617354 0.068407553 0.069161996 0.070282175 0.072777655 0.074433182 0.074805092 0.076529698 0.079015123 0.084455943 0.086941165 0.087175805 0.087639942 0.089615623 0.090672570 0.091487807 0.094253651 0.094999797 0.095850284 0.096489749 0.097866960 0.098843522 0.100225039 0.100790460 0.101935272 0.102724379 0.103228315 0.103780965 0.104489181 0.104876302 0.106352548 0.107044694 0.108195524 0.110015953 0.111171955 0.112468123 0.113563960 0.115095049 0.116279465 0.116837576 0.118760385 0.121337942 0.122475346 0.123737337 0.125220973 0.126232134 0.126336759 0.126766473 0.127592813 0.132134380 0.135110459 0.135871529 0.143031552 0.143958437 0.147093727 0.147620072 0.149765165 0.152043420 0.154705293 0.155124847 0.156675447 0.161389541 0.161997394 0.173774809 0.174404653 0.181827675 0.185210221 0.186473817 0.189656676 0.190451236 0.194381378 0.195682389 0.198887486 0.200370270 0.205254453 0.207151514 0.207436946 0.210283202 0.216585357 0.217115579 0.217967393 0.219924265 0.220894859 0.225400034 0.226740986 0.232397487 0.235185174 0.235715890 0.236089957 0.244745687 0.256131890 0.257330090 0.264006384 0.269982256 0.280777355 0.283507132 0.286361163 0.291981008 0.297041138 0.304491531 0.306002491 0.307322302 0.314502088 0.316828970 0.317440882 0.322253302 0.330153567 0.332933780 0.351843702 0.352977636 0.355099191 0.355956031 0.360097721 0.363079603 0.364575705 0.384147872 0.386098345 0.392249671 0.410580432 0.426063666 0.431255046 0.462486690 0.469200399 0.479067575 0.484539367 0.484622030 0.487571811 0.491494205 0.509684849 0.515579962 0.535395073 0.569319737 0.575364562 0.591610389 0.594233983 0.607351188 0.608472512 0.644965717 0.647858718 0.649766015 0.674432544 0.678452767 0.687574107 0.693038094 0.693733494 0.700247212 0.704803999 0.718490853 0.742276106 0.751440702 0.759459496 0.772060049 0.774553315 0.779682451 0.811014776 0.816454947 0.820154845 0.823122044 0.823722485 0.832238660 0.835031957 0.837881230 0.842616400 0.845956511 0.847669138 0.850222607 0.859654526 0.865952043 0.868778278 0.874693944 0.886188158 0.887679434 0.889781508 0.900813741 0.901123522 0.904191415 0.924097901 0.928170053 0.936586120 0.937988148 0.966382738 0.976463803 0.987357332 1.001756464 1.020305568 1.028745384 1.042543892 1.052054472 1.058268177 1.068907315 1.086999930 1.088934821 1.105160827 1.109781028 1.112787895 1.127609474 1.136306776 1.141153203 1.145134329 1.176584709 1.179171225 1.181822078 1.187351882 1.191633587 1.198372541 1.224757311 1.228981588 1.274810873 1.302823164 1.321413498 1.328436639 1.333284298 1.336601030 1.338100714 1.342219969 1.344036063 1.345144308 1.359812955 1.379673452 1.383364392 1.385788719 1.409878219 1.420852779 1.431652312 1.551510812 1.686244624 1.776355059</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">296</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33677215" y3="0.06158529" z3="-0.18993668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38255449" y3="0.17429092" z3="0.42088425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64468152" y3="0.44844538" z3="-0.33936687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7302552" y3="1.24215086" z3="-2.26388136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3867957" y3="0.44519984" z3="-1.18384058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73249871" y3="0.8491492" z3="-3.66613924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63832319" y3="1.75260615" z3="-3.14125042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39180398" y3="2.59221291" z3="-4.63293951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56737646" y3="1.25202285" z3="-4.38368383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5148352" y3="2.92638202" z3="-5.19606784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92517227" y3="-0.48047119" z3="-3.43902978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09552846" y3="0.05905625" z3="-1.00107317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39766427" y3="-1.08696742" z3="-1.99732569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92606187" y3="-0.9536467" z3="-1.82671257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09810995" y3="-2.41173919" z3="-1.83740829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14708284" y3="-3.61792116" z3="0.67588199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01021714" y3="-5.24005292" z3="-4.74439324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24055732" y3="-4.98627917" z3="-3.70618133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84242939" y3="-4.30666855" z3="-1.0853039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78178428" y3="-4.57585091" z3="-2.85276446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55606021" y3="-5.08317627" z3="-3.24934404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85790305" y3="-4.73791337" z3="-1.9343469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49290538" y3="-4.25061467" z3="-1.52591842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81507203" y3="-4.49129912" z3="-3.19903215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35421992" y3="-5.39692472" z3="-3.92634025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89485101" y3="-4.78084131" z3="-1.59143836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03397554" y3="-3.86369823" z3="0.23694422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17496463" y3="-3.65386415" z3="0.88179022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06213791" y3="-4.1161066" z3="0.44637164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17021641" y3="-3.52345225" z3="2.34932001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22861684" y3="-3.34751558" z3="5.14779487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36615306" y3="-3.73198613" z3="3.05195539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00334961" y3="-3.23324076" z3="3.07205145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02972092" y3="-3.14584721" z3="4.46093115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3944975" y3="-3.64618757" z3="4.44108194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28060858" y3="-3.97160964" z3="2.50293069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04409805" y3="-3.09663697" z3="2.56825594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10078706" y3="-2.93934555" z3="4.9999057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33264232" y3="-3.819753" z3="4.9756361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24901399" y3="-3.28709468" z3="6.23949256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41095007" y3="-3.88481454" z3="-0.62023548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16964743" y3="-3.37856164" z3="-1.07089727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52524523" y3="0.24730288" z3="-4.71662929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08480858" y3="-1.72612137" z3="0.02939752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91119686" y3="-0.97871416" z3="1.19354536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8514144" y3="-0.32690921" z3="1.52998293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37565784" y3="0.54569164" z3="1.23302085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45860938" y3="1.45604217" z3="-0.38693506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97660082" y3="-0.71162994" z3="1.39752114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.355427" y3="1.72722239" z3="2.68669825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88659046" y3="-0.97368435" z3="2.09098843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65955212" y3="-0.36336144" z3="3.35165842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22193899" y3="0.77154148" z3="-1.21955039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31560638" y3="2.2457738" z3="-0.37921531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4388455" y3="1.94079426" z3="-0.5414487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01006987" y3="-1.08244125" z3="2.43549352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94777431" y3="-0.24609835" z3="1.15836266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84984662" y3="-1.54920172" z3="0.69260334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41046267" y3="1.18052224" z3="3.6447028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58297179" y3="2.31121729" z3="2.68669771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19513738" y3="2.44358421" z3="2.64528937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79677038" y3="-0.81938427" z3="3.86287425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57432575" y3="-0.54092542" z3="3.93294981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49085111" y3="0.71960747" z3="3.23482133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8357617" y3="-0.6940955" z3="0.99313703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41791987" y3="-2.02384086" z3="0.85600405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76607652" y3="-2.67145006" z3="1.89813466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54912626" y3="-1.97633036" z3="3.0841183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01922748" y3="-0.68079742" z3="3.27802823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6706104" y3="-0.04660341" z3="2.2247837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5285161" y3="-2.52325081" z3="-0.10820259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37560076" y3="-3.6825953" z3="1.775343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68768534" y3="-2.5786155" z3="4.10667772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8304744" y3="-0.16960307" z3="4.22256108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00675309" y3="0.98749398" z3="2.33871611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7903187" y3="0.4704115" z3="-4.28843564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77211629" y3="-0.49603307" z3="-4.46226912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42789515" y3="-1.68909516" z3="-5.08711631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14292057" y3="-1.92277611" z3="-5.56718078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83192075" y3="-0.95342868" z3="-5.37125194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03207373" y3="1.39510288" z3="-3.75809843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7898036" y3="-0.3480265" z3="-4.0997388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44234139" y3="-2.73633598" z3="-5.22492161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08440542" y3="-2.86419176" z3="-6.06747374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85258918" y3="-1.14152606" z3="-5.70826325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35301608" y3="-1.88508962" z3="5.04754494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31690143" y3="-3.72163911" z3="3.93876388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22242022" y3="-3.63869387" z3="-6.00435608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44322943" y3="-2.64840869" z3="-4.54192259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07242678" y3="1.16538209" z3="-1.48986199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11437339" y3="1.5535583" z3="-2.4711756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44244933" y3="1.48956781" z3="-1.68692433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85632127" y3="2.14954634" z3="-2.81812042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16652975" y3="1.19245845" z3="-0.92200474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91386364" y3="2.38848765" z3="-2.96155268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57866174" y3="2.21710397" z3="-3.64119095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91146104" y3="2.50645202" z3="-3.80982905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85963688" y3="2.48839602" z3="-4.4176011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24590775" y3="3.01098141" z3="-4.72100997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41213114" y3="3.15571405" z3="-3.34851352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30035395" y3="3.56613014" z3="-4.14185925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22190376" y3="4.16817722" z3="-2.7605216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97696548" y3="5.50030874" z3="-2.99543049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04771744" y3="3.88128353" z3="-2.10764339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61570572" y3="6.2570642" z3="-2.5311981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08165131" y3="4.95085991" z3="-4.37921211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90426619" y3="5.90130284" z3="-3.82664131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23308241" y3="5.24675631" z3="-5.00381868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72491128" y3="6.96383355" z3="-4.01327533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48259036" y3="-2.20386222" z3="-0.2920749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45203741" y3="-2.99314441" z3="-1.0624816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01128562" y3="-2.59008511" z3="0.59409932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09791851" y3="-1.3827485" z3="-0.70662278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18104591" y3="-1.42478053" z3="-1.13967459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31867717" y3="-0.38287397" z3="-1.48394021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10466226" y3="-1.54911836" z3="-0.93465486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42012131" y3="-2.07651528" z3="-1.9930922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3368,.0616,-.1899;7.3826,.1743,.4209;6.6447,.4484,-.3394;4.7303,1.2422,-2.2639;4.3868,.4452,-1.1838;2.7325,.8491,-3.6661;3.6383,1.7526,-3.1413;1.3918,2.5922,-4.6329;1.5674,1.252,-4.3837;.5148,2.9264,-5.1961;2.9252,-.4805,-3.439;3.0955,.0591,-1.0011;2.3977,-1.087,-1.9973;.9261,-.9536,-1.8267;3.0981,-2.4117,-1.8374;-.1471,-3.6179,.6759;-.0102,-5.2401,-4.7444;-.2406,-4.9863,-3.7062;-.8424,-4.3067,-1.0853;.7818,-4.5759,-2.8528;-1.5561,-5.0832,-3.2493;-1.8579,-4.7379,-1.9343;.4929,-4.2506,-1.5259;1.8151,-4.4913,-3.199;-2.3542,-5.3969,-3.9263;-2.8949,-4.7808,-1.5914;-1.034,-3.8637,.2369;-2.175,-3.6539,.8818;-3.0621,-4.1161,.4464;-2.1702,-3.5235,2.3493;-2.2286,-3.3475,5.1478;-3.3662,-3.732,3.052;-1.0033,-3.2332,3.0721;-1.0297,-3.1458,4.4609;-3.3945,-3.6462,4.4411;-4.2806,-3.9716,2.5029;-.0441,-3.0966,2.5683;-.1008,-2.9393,4.9999;-4.3326,-3.8198,4.9756;-2.249,-3.2871,6.2395;1.411,-3.8848,-.6202;2.1696,-3.3786,-1.0709;.5252,.2473,-4.7166;-3.0848,-1.7261,.0294;-2.9112,-.9787,1.1935;-1.8514,-.3269,1.53;-.3757,.5457,1.233;-.4586,1.456,-.3869;.9766,-.7116,1.3975;-.3554,1.7272,2.6867;-3.8866,-.9737,2.091;-3.6596,-.3634,3.3517;-.2219,.7715,-1.2196;.3156,2.2458,-.3792;-1.4388,1.9408,-.5414;1.0101,-1.0824,2.4355;1.9478,-.2461,1.1584;.8498,-1.5492,.6926;-.4105,1.1805,3.6447;.583,2.3112,2.6867;-1.1951,2.4436,2.6453;-2.7968,-.8194,3.8629;-4.5743,-.5409,3.9329;-3.4909,.7196,3.2348;4.8358,-.6941,.9931;4.4179,-2.0238,.856;3.7661,-2.6715,1.8981;3.5491,-1.9763,3.0841;4.0192,-.6808,3.278;4.6706,-.0466,2.2248;4.5285,-2.5233,-.1082;3.3756,-3.6826,1.7753;2.6877,-2.5786,4.1067;3.8305,-.1696,4.2226;5.0068,.9875,2.3387;-.7903,.4704,-4.2884;-1.7721,-.496,-4.4623;-1.4279,-1.6891,-5.0871;-.1429,-1.9228,-5.5672;.8319,-.9534,-5.3713;-1.0321,1.3951,-3.7581;-2.7898,-.348,-4.0997;-2.4423,-2.7363,-5.2249;.0844,-2.8642,-6.0675;1.8526,-1.1415,-5.7083;2.353,-1.8851,5.0475;2.3169,-3.7216,3.9388;-2.2224,-3.6387,-6.0044;-3.4432,-2.6484,-4.5419;7.0724,1.1654,-1.4899;6.1144,1.5536,-2.4712;8.4424,1.4896,-1.6869;8.8563,2.1495,-2.8181;9.1665,1.1925,-.922;9.9139,2.3885,-2.9616;6.5787,2.2171,-3.6412;7.9115,2.5065,-3.8098;5.8596,2.4884,-4.4176;8.2459,3.011,-4.721;3.4121,3.1557,-3.3485;2.3004,3.5661,-4.1419;4.2219,4.1682,-2.7605;3.977,5.5003,-2.9954;5.0477,3.8813,-2.1076;4.6157,6.2571,-2.5312;2.0817,4.9509,-4.3792;2.9043,5.9013,-3.8266;1.2331,5.2468,-5.0038;2.7249,6.9638,-4.0133;-4.4826,-2.2039,-.2921;-4.452,-2.9931,-1.0625;-5.0113,-2.5901,.5941;-5.0979,-1.3827,-.7066;-2.181,-1.4248,-1.1397;-2.3187,-.3829,-1.4839;-1.1047,-1.5491,-.9347;-2.4201,-2.0765,-1.9931;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424097003</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001514360690 0.000186368975 0.022132633265 0.005339678013</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030726852 -0.000172082 -0.000054646 0.000124132 0.000200506 0.000235880 0.000341590 0.000433228 0.000605003 0.000828865 0.000898525 0.000990219 0.001212354 0.001278272 0.001414265 0.001471965 0.001519907 0.001727010 0.001795494 0.001910672 0.002111772 0.002291853 0.002415235 0.002503015 0.002689977 0.003052939 0.003063156 0.003222179 0.003562674 0.003870531 0.004452722 0.004709278 0.004762372 0.005119512 0.006020276 0.006076244 0.006322114 0.006664929 0.006919411 0.007615480 0.008087565 0.008151160 0.008414082 0.009421947 0.009773388 0.010081548 0.010137014 0.011160841 0.011945424 0.012209153 0.013021914 0.013113310 0.014229317 0.014844406 0.015389068 0.015695475 0.015972175 0.016675337 0.016780985 0.017509610 0.018238977 0.018784657 0.019379405 0.019622555 0.020201426 0.020714522 0.021238409 0.021410770 0.022266698 0.023121291 0.023848470 0.026475527 0.026887216 0.027847464 0.028197639 0.029573192 0.030445805 0.031614404 0.033275954 0.033701317 0.034150012 0.035775248 0.037169470 0.037408244 0.039492247 0.040030096 0.040237308 0.041046766 0.042574242 0.044706716 0.045600072 0.047142194 0.048035178 0.049283660 0.050508116 0.051080010 0.051303211 0.051680801 0.052490671 0.052743905 0.052958208 0.053229730 0.054832860 0.054983991 0.056108527 0.056355964 0.056576774 0.057035536 0.057234248 0.059211885 0.060606572 0.061063698 0.061840073 0.062415912 0.063421467 0.064536924 0.065318740 0.066002201 0.066615016 0.068407945 0.069169325 0.070281433 0.072783591 0.074439668 0.074804451 0.076527581 0.079037674 0.084465538 0.086940642 0.087177360 0.087637866 0.089644678 0.090670685 0.091488749 0.094251168 0.095005254 0.095848642 0.096490932 0.097866731 0.098844311 0.100226699 0.100797591 0.102040814 0.102773361 0.103228320 0.103786599 0.104495632 0.104879043 0.106355528 0.107052397 0.108205461 0.110017463 0.111174872 0.112464484 0.113560167 0.115092825 0.116279534 0.116840299 0.118758978 0.121344368 0.122480410 0.123738404 0.125266749 0.126237447 0.126337659 0.126769102 0.127599907 0.132148252 0.135109556 0.135871927 0.143051278 0.143967270 0.147094144 0.147639824 0.149764631 0.151920882 0.154672560 0.155006837 0.156673065 0.161388140 0.162002186 0.173780256 0.174411264 0.181827488 0.185210439 0.186476718 0.189661824 0.190449011 0.194402992 0.195684752 0.198898557 0.200372020 0.205240315 0.207155588 0.207436357 0.210284152 0.216598348 0.217137018 0.217966587 0.219940784 0.220890988 0.225402473 0.226743214 0.232399781 0.235188686 0.235716681 0.236091862 0.244746138 0.256133974 0.257332624 0.264006629 0.269978350 0.280778900 0.283513601 0.286361858 0.291979626 0.297039176 0.304490706 0.306014457 0.307322742 0.314507115 0.316828094 0.317443747 0.322256621 0.330155703 0.332929807 0.351845957 0.352983940 0.355104518 0.355954867 0.360090552 0.363084972 0.364581526 0.384153013 0.386055619 0.392248173 0.410574997 0.426064123 0.431256387 0.462489843 0.469204097 0.479092123 0.484548460 0.484621356 0.487546463 0.491494612 0.509684910 0.515578107 0.535389971 0.569294844 0.575364778 0.591532935 0.594234722 0.607349681 0.608435349 0.644969091 0.647848993 0.649765658 0.674435832 0.678442543 0.687636661 0.693074893 0.693708981 0.700256146 0.704807004 0.718483536 0.742273802 0.751441828 0.759458352 0.772064853 0.774575968 0.779686536 0.811013608 0.816460628 0.820165785 0.823123974 0.823728606 0.832248037 0.835033488 0.837871095 0.842622831 0.845957068 0.847674494 0.850222996 0.859690240 0.865952084 0.868843901 0.874695471 0.886196964 0.887690536 0.889782252 0.900807990 0.901111548 0.904182094 0.924097722 0.928196105 0.936590027 0.938001407 0.966383215 0.976470859 0.987359480 1.001759130 1.020314654 1.028755086 1.042548506 1.052070643 1.058271724 1.068916929 1.087000913 1.088942071 1.105169283 1.109967247 1.112788368 1.127650833 1.136315001 1.141152974 1.145136770 1.176593298 1.179176203 1.181828801 1.187356620 1.191635519 1.198397193 1.224757144 1.228996836 1.274761563 1.302829188 1.321408946 1.328432527 1.333273673 1.336598498 1.338087453 1.342178970 1.344038886 1.345137208 1.359827789 1.379682657 1.383371015 1.385800136 1.409097081 1.420887022 1.431413203 1.551511084 1.686299586 1.776372730</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">297</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34114713" y3="0.05536599" z3="-0.19171523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38744784" y3="0.16982225" z3="0.41743986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64861346" y3="0.44407241" z3="-0.341811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73135993" y3="1.2374701" z3="-2.26384029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38988028" y3="0.43917306" z3="-1.18438302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73110686" y3="0.84701622" z3="-3.66281562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63800465" y3="1.74903517" z3="-3.13869965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38805745" y3="2.59118527" z3="-4.62379227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56462548" y3="1.25098197" z3="-4.37733099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51001213" y3="2.92641092" z3="-5.18456959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92408315" y3="-0.4829948" z3="-3.43855077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09913205" y3="0.05210057" z3="-1.00030437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39956842" y3="-1.09227822" z3="-1.99702183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92841345" y3="-0.95908246" z3="-1.82290108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10001483" y3="-2.41762366" z3="-1.84129571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14525176" y3="-3.61669159" z3="0.67279275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01127738" y3="-5.24728901" z3="-4.74547903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24103932" y3="-4.99181854" z3="-3.7074489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8429165" y3="-4.30643838" z3="-1.08751308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78235061" y3="-4.58259109" z3="-2.85405051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55763073" y3="-5.08459836" z3="-3.2507251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85955759" y3="-4.73656295" z3="-1.93645499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49332729" y3="-4.25471373" z3="-1.52780489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81466961" y3="-4.49783703" z3="-3.19966428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35407549" y3="-5.40081892" z3="-3.92701319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89586465" y3="-4.77877143" z3="-1.59412586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03391601" y3="-3.86024279" z3="0.2337954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17452231" y3="-3.65126318" z3="0.87930687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06103217" y3="-4.11513113" z3="0.44478201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16895634" y3="-3.51956442" z3="2.34661186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22484409" y3="-3.34216372" z3="5.14493828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3635747" y3="-3.73102557" z3="3.05043854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00216623" y3="-3.2251137" z3="3.06792982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0275409" y3="-3.1366924" z3="4.45673354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3904624" y3="-3.64479629" z3="4.43963348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27875607" y3="-3.97239766" z3="2.50221686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04338873" y3="-3.08629755" z3="2.56264524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09839801" y3="-2.92752002" z3="4.99488576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32706855" y3="-3.82152404" z3="4.97524446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24404334" y3="-3.28147" z3="6.23667978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41105003" y3="-3.88825703" z3="-0.62250635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17125993" y3="-3.38422882" z3="-1.07398647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52319317" y3="0.24566277" z3="-4.71244364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08501043" y3="-1.72466253" z3="0.02601928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91002337" y3="-0.9778241" z3="1.19019738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84767497" y3="-0.32990238" z3="1.52645876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.377348" y3="0.55220627" z3="1.23142511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46034671" y3="1.45577416" z3="-0.39252022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98118174" y3="-0.69776733" z3="1.4045715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37102299" y3="1.73992101" z3="2.68028699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88525124" y3="-0.97078362" z3="2.08773817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65725884" y3="-0.36122291" z3="3.34849477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21497851" y3="0.76919754" z3="-1.22089572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30765498" y3="2.251915" z3="-0.38494209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44378771" y3="1.9319023" z3="-0.55360429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01494475" y3="-1.06243848" z3="2.44448375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95189592" y3="-0.23139518" z3="1.16312467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85748375" y3="-1.54022531" z3="0.70475833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4246751" y3="1.19677504" z3="3.64055676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.561764" y3="2.33281581" z3="2.68113763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21727001" y3="2.44840408" z3="2.63264374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79608564" y3="-0.8201208" z3="3.86022369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57280558" y3="-0.53643195" z3="3.92863902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48558573" y3="0.72138463" z3="3.23200879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84077631" y3="-0.70017257" z3="0.99159137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41587472" y3="-2.02767718" z3="0.85363716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76347403" y3="-2.67345119" z3="1.8965479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55256772" y3="-1.9787422" z3="3.08391008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02993223" y3="-0.68597937" z3="3.27850058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68250472" y3="-0.05372623" z3="2.22486457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52228072" y3="-2.52660305" z3="-0.11101437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.368401" y3="-3.68260734" z3="1.77376361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69000924" y3="-2.5779831" z3="4.10725332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84625789" y3="-0.17505084" z3="4.22430435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02533186" y3="0.97845451" z3="2.34037949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79239538" y3="0.46692629" z3="-4.28403479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77345124" y3="-0.50003465" z3="-4.46024475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42845711" y3="-1.69151675" z3="-5.08712259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14360035" y3="-1.92334088" z3="-5.5684916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83059911" y3="-0.9533833" z3="-5.36998112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03474905" y3="1.39023127" z3="-3.75160575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7908776" y3="-0.35327993" z3="-4.096962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44186663" y3="-2.73929211" z3="-5.22634871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08457697" y3="-2.86343916" z3="-6.07110728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85141657" y3="-1.13971956" z3="-5.7079013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35595185" y3="-1.88215383" z3="5.04632548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31692858" y3="-3.72071661" z3="3.94092324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22193763" y3="-3.6396971" z3="-6.00781194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44195752" y3="-2.65429318" z3="-4.54121923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07453362" y3="1.16300693" z3="-1.49182166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11502463" y3="1.55085093" z3="-2.47195393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44409228" y3="1.49030864" z3="-1.68933742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85589118" y3="2.15162127" z3="-2.82017201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16934523" y3="1.19362295" z3="-0.92530514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91284356" y3="2.39221756" z3="-2.96409978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57720179" y3="2.215858" z3="-3.64166451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90950875" y3="2.50743503" z3="-3.81097688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8569781" y3="2.48658881" z3="-4.41724568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2422538" y3="3.01164198" z3="-4.72223058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41059987" y3="3.15260478" z3="-3.34223533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29687361" y3="3.56432937" z3="-4.13219913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22033857" y3="4.16458487" z3="-2.75276328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97389972" y3="5.49697712" z3="-2.98408015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04738407" y3="3.87699326" z3="-2.10172639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61268532" y3="6.25326145" z3="-2.51888886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07579316" y3="4.95020638" z3="-4.3646331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89930884" y3="5.89918733" z3="-3.81230162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22571393" y3="5.24703082" z3="-4.98677922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71871646" y3="6.96202211" z3="-3.99594054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48277164" y3="-2.20174652" z3="-0.29521598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45246066" y3="-2.99175087" z3="-1.06470527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0117655" y3="-2.58688739" z3="0.59145948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09726415" y3="-1.38073077" z3="-0.71074822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18032324" y3="-1.42478899" z3="-1.14253294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31760778" y3="-0.38364991" z3="-1.48796266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10400958" y3="-1.54984964" z3="-0.93688451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42054641" y3="-2.07705037" z3="-1.99588246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3411,.0554,-.1917;7.3874,.1698,.4174;6.6486,.4441,-.3418;4.7314,1.2375,-2.2638;4.3899,.4392,-1.1844;2.7311,.847,-3.6628;3.638,1.749,-3.1387;1.3881,2.5912,-4.6238;1.5646,1.251,-4.3773;.51,2.9264,-5.1846;2.9241,-.483,-3.4386;3.0991,.0521,-1.0003;2.3996,-1.0923,-1.997;.9284,-.9591,-1.8229;3.1,-2.4176,-1.8413;-.1453,-3.6167,.6728;-.0113,-5.2473,-4.7455;-.241,-4.9918,-3.7074;-.8429,-4.3064,-1.0875;.7824,-4.5826,-2.8541;-1.5576,-5.0846,-3.2507;-1.8596,-4.7366,-1.9365;.4933,-4.2547,-1.5278;1.8147,-4.4978,-3.1997;-2.3541,-5.4008,-3.927;-2.8959,-4.7788,-1.5941;-1.0339,-3.8602,.2338;-2.1745,-3.6513,.8793;-3.061,-4.1151,.4448;-2.169,-3.5196,2.3466;-2.2248,-3.3422,5.1449;-3.3636,-3.731,3.0504;-1.0022,-3.2251,3.0679;-1.0275,-3.1367,4.4567;-3.3905,-3.6448,4.4396;-4.2788,-3.9724,2.5022;-.0434,-3.0863,2.5626;-.0984,-2.9275,4.9949;-4.3271,-3.8215,4.9752;-2.244,-3.2815,6.2367;1.4111,-3.8883,-.6225;2.1713,-3.3842,-1.074;.5232,.2457,-4.7124;-3.085,-1.7247,.026;-2.91,-.9778,1.1902;-1.8477,-.3299,1.5265;-.3773,.5522,1.2314;-.4603,1.4558,-.3925;.9812,-.6978,1.4046;-.371,1.7399,2.6803;-3.8853,-.9708,2.0877;-3.6573,-.3612,3.3485;-.215,.7692,-1.2209;.3077,2.2519,-.3849;-1.4438,1.9319,-.5536;1.0149,-1.0624,2.4445;1.9519,-.2314,1.1631;.8575,-1.5402,.7048;-.4247,1.1968,3.6406;.5618,2.3328,2.6811;-1.2173,2.4484,2.6326;-2.7961,-.8201,3.8602;-4.5728,-.5364,3.9286;-3.4856,.7214,3.232;4.8408,-.7002,.9916;4.4159,-2.0277,.8536;3.7635,-2.6735,1.8965;3.5526,-1.9787,3.0839;4.0299,-.686,3.2785;4.6825,-.0537,2.2249;4.5223,-2.5266,-.111;3.3684,-3.6826,1.7738;2.69,-2.578,4.1073;3.8463,-.1751,4.2243;5.0253,.9785,2.3404;-.7924,.4669,-4.284;-1.7735,-.5,-4.4602;-1.4285,-1.6915,-5.0871;-.1436,-1.9233,-5.5685;.8306,-.9534,-5.37;-1.0347,1.3902,-3.7516;-2.7909,-.3533,-4.097;-2.4419,-2.7393,-5.2263;.0846,-2.8634,-6.0711;1.8514,-1.1397,-5.7079;2.356,-1.8822,5.0463;2.3169,-3.7207,3.9409;-2.2219,-3.6397,-6.0078;-3.442,-2.6543,-4.5412;7.0745,1.163,-1.4918;6.115,1.5509,-2.472;8.4441,1.4903,-1.6893;8.8559,2.1516,-2.8202;9.1693,1.1936,-.9253;9.9128,2.3922,-2.9641;6.5772,2.2159,-3.6417;7.9095,2.5074,-3.811;5.857,2.4866,-4.4172;8.2423,3.0116,-4.7222;3.4106,3.1526,-3.3422;2.2969,3.5643,-4.1322;4.2203,4.1646,-2.7528;3.9739,5.497,-2.9841;5.0474,3.877,-2.1017;4.6127,6.2533,-2.5189;2.0758,4.9502,-4.3646;2.8993,5.8992,-3.8123;1.2257,5.247,-4.9868;2.7187,6.962,-3.9959;-4.4828,-2.2017,-.2952;-4.4525,-2.9918,-1.0647;-5.0118,-2.5869,.5915;-5.0973,-1.3807,-.7107;-2.1803,-1.4248,-1.1425;-2.3176,-.3836,-1.488;-1.104,-1.5498,-.9369;-2.4205,-2.0771,-1.9959;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424339865</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001645556315 0.000206164474 0.020090931079 0.005334227388</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030729261 -0.000314060 -0.000048772 0.000117741 0.000187170 0.000330375 0.000384001 0.000432741 0.000600680 0.000837249 0.000882112 0.000978578 0.001208089 0.001264502 0.001410460 0.001475250 0.001521481 0.001734167 0.001787715 0.001907018 0.002112509 0.002283185 0.002409615 0.002496688 0.002687768 0.003050029 0.003067419 0.003222319 0.003557059 0.003865467 0.004453015 0.004712349 0.004764720 0.005119341 0.006020054 0.006063796 0.006317129 0.006667207 0.006896314 0.007615816 0.008080571 0.008152074 0.008414922 0.009423750 0.009731631 0.010075803 0.010126554 0.011160619 0.011945199 0.012212893 0.013022908 0.013115077 0.014231420 0.014843521 0.015389611 0.015696683 0.015976514 0.016685853 0.016779109 0.017508755 0.018243472 0.018791009 0.019377361 0.019622137 0.020204224 0.020717045 0.021237096 0.021408635 0.022263928 0.023122872 0.023847706 0.026476607 0.026889037 0.027857872 0.028203396 0.029575386 0.030447860 0.031615920 0.033278612 0.033709227 0.034150624 0.035776567 0.037170725 0.037401918 0.039493531 0.040027626 0.040232105 0.041054442 0.042577889 0.044707765 0.045621720 0.047140789 0.048036582 0.049283843 0.050509039 0.051080275 0.051303195 0.051684213 0.052490681 0.052754023 0.052958371 0.053230845 0.054835290 0.054983992 0.056113154 0.056357476 0.056577085 0.057037838 0.057236182 0.059212233 0.060610970 0.061065226 0.061840709 0.062417008 0.063419940 0.064537411 0.065318275 0.066002319 0.066615681 0.068407705 0.069175732 0.070281093 0.072787826 0.074443824 0.074804444 0.076528355 0.079061884 0.084479070 0.086944609 0.087178356 0.087640658 0.089663889 0.090676060 0.091488371 0.094258224 0.095006430 0.095849184 0.096493273 0.097867431 0.098846023 0.100226973 0.100803964 0.102147972 0.102849036 0.103229429 0.103795288 0.104495949 0.104885525 0.106357389 0.107057589 0.108213661 0.110018357 0.111175713 0.112466179 0.113559722 0.115095292 0.116280639 0.116844169 0.118761001 0.121343866 0.122481686 0.123740553 0.125286161 0.126242692 0.126339960 0.126771711 0.127606321 0.132153136 0.135109940 0.135872573 0.143083404 0.143977072 0.147094957 0.147650315 0.149765586 0.151910441 0.154672939 0.155008038 0.156672550 0.161386793 0.162002405 0.173782838 0.174417564 0.181831778 0.185211249 0.186477724 0.189668197 0.190448325 0.194415698 0.195701402 0.198908406 0.200372519 0.205231152 0.207157738 0.207435837 0.210285306 0.216611593 0.217143212 0.217966598 0.219944027 0.220890146 0.225405707 0.226745567 0.232400038 0.235188798 0.235717927 0.236093925 0.244747143 0.256133967 0.257336535 0.264006655 0.269978376 0.280780547 0.283523594 0.286361931 0.291980046 0.297038833 0.304493102 0.306015341 0.307322262 0.314515446 0.316829430 0.317445324 0.322257768 0.330161910 0.332931382 0.351842784 0.352992612 0.355110844 0.355954780 0.360089180 0.363085629 0.364584312 0.384168837 0.386056401 0.392250083 0.410575781 0.426066629 0.431256608 0.462492838 0.469208548 0.479107198 0.484556162 0.484623667 0.487543827 0.491494405 0.509685030 0.515579007 0.535391812 0.569303474 0.575368327 0.591540087 0.594238257 0.607352480 0.608429964 0.644967199 0.647849631 0.649766613 0.674437096 0.678441794 0.687727990 0.693133689 0.693726372 0.700268166 0.704809243 0.718485701 0.742273658 0.751442950 0.759459081 0.772070262 0.774584907 0.779691984 0.811016285 0.816463264 0.820176336 0.823125075 0.823735634 0.832260803 0.835035777 0.837870562 0.842631506 0.845958038 0.847678905 0.850228427 0.859718067 0.865952061 0.868876781 0.874697151 0.886206356 0.887711675 0.889783137 0.900812858 0.901110235 0.904182429 0.924098441 0.928215744 0.936591265 0.938025319 0.966383676 0.976483994 0.987368493 1.001761321 1.020325786 1.028766331 1.042561378 1.052118305 1.058282721 1.068940173 1.087001484 1.088947416 1.105184805 1.110204011 1.112791324 1.127655703 1.136327583 1.141158044 1.145140966 1.176608300 1.179183966 1.181838723 1.187359213 1.191635903 1.198412348 1.224759360 1.229004717 1.274763263 1.302834567 1.321408383 1.328432401 1.333274879 1.336599049 1.338099343 1.342176488 1.344044306 1.345137958 1.359830787 1.379684045 1.383389724 1.385835454 1.409075878 1.420903268 1.431431705 1.551511174 1.686324567 1.776411031</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">298</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34031211" y3="0.05003039" z3="-0.19279414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38564607" y3="0.16849751" z3="0.41892726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64701341" y3="0.44180733" z3="-0.3409353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73011272" y3="1.23492658" z3="-2.2631506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38918572" y3="0.4334997" z3="-1.18578056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73061452" y3="0.84512243" z3="-3.66425096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63604247" y3="1.74738293" z3="-3.13665049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38544649" y3="2.59109221" z3="-4.61971612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56362116" y3="1.24979148" z3="-4.37781954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50704547" y3="2.92676968" z3="-5.17970088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92536401" y3="-0.48527275" z3="-3.44319918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09882679" y3="0.04445996" z3="-1.00346434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40034923" y3="-1.0979713" z3="-2.0031881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92897679" y3="-0.96583911" z3="-1.82952332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10109016" y3="-2.42326187" z3="-1.84931444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14357268" y3="-3.61635089" z3="0.67410914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01712725" y3="-5.2511244" z3="-4.74342886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24538338" y3="-4.99515248" z3="-3.7052992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84186201" y3="-4.30921846" z3="-1.08473489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7788592" y3="-4.5852062" z3="-2.85404394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56029368" y3="-5.08864068" z3="-3.24631883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85930602" y3="-4.74029368" z3="-1.93153066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49277902" y3="-4.25694393" z3="-1.52733599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81203463" y3="-4.50386634" z3="-3.20198466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36033961" y3="-5.40162224" z3="-3.92161722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89602695" y3="-4.77979659" z3="-1.58713129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03116891" y3="-3.86247495" z3="0.23661902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17144753" y3="-3.65061545" z3="0.88206168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05911198" y3="-4.11417188" z3="0.44884262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16566456" y3="-3.51565172" z3="2.34907806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22196399" y3="-3.33357523" z3="5.14712714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36073029" y3="-3.72457356" z3="3.05310472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9987516" y3="-3.22104479" z3="3.07007952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02410803" y3="-3.1308986" z3="4.45882771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38807108" y3="-3.63569107" z3="4.44205128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27504238" y3="-3.96730686" z3="2.50529387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04054481" y3="-3.08263736" z3="2.56490825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09535923" y3="-2.92162269" z3="4.99694099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32533965" y3="-3.80995295" z3="4.9777625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24135273" y3="-3.27101782" z3="6.2387309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41341422" y3="-3.89142568" z3="-0.62391048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17222148" y3="-3.38863312" z3="-1.07756781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52237533" y3="0.24520435" z3="-4.71399868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08224892" y3="-1.72506477" z3="0.02482563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9065082" y3="-0.97526182" z3="1.18690261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84452532" y3="-0.32563409" z3="1.52047226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37478647" y3="0.55600076" z3="1.22189869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45683345" y3="1.45255435" z3="-0.40600467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98361122" y3="-0.69273746" z3="1.40187755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36963381" y3="1.75064248" z3="2.66479716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88109006" y3="-0.96634852" z3="2.08513833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65228607" y3="-0.35321238" z3="3.3439863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21116308" y3="0.76271911" z3="-1.23168887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31036223" y3="2.24916817" z3="-0.40135598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44044443" y3="1.92761081" z3="-0.56914044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01519596" y3="-1.05569658" z3="2.44277162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95407447" y3="-0.22636164" z3="1.16159309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86153795" y3="-1.53644647" z3="0.70337489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42327301" y3="1.21252618" z3="3.62776106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56284617" y3="2.34399066" z3="2.66268145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21615738" y3="2.4582516" z3="2.61326363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79113238" y3="-0.81072427" z3="3.85661412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56775413" y3="-0.52607951" z3="3.92556658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48001277" y3="0.728969" z3="3.22424548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84055557" y3="-0.7072298" z3="0.9896384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4115952" y3="-2.03314577" z3="0.84952475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75895968" y3="-2.67936893" z3="1.89198373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55240565" y3="-1.98677336" z3="3.08132966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03428859" y3="-0.6960634" z3="3.27814965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68655682" y3="-0.06332123" z3="2.22457258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51406517" y3="-2.52991166" z3="-0.11706704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36000399" y3="-3.68696323" z3="1.76709691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69042951" y3="-2.58583842" z3="4.10520847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85417883" y3="-0.18695369" z3="4.22551276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03170401" y3="0.96750833" z3="2.34095436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79349158" y3="0.46579327" z3="-4.28554478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7741334" y3="-0.50136537" z3="-4.46140531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42841799" y3="-1.69286439" z3="-5.0883981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14335013" y3="-1.92372616" z3="-5.56947351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83022327" y3="-0.95340481" z3="-5.37182303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03640555" y3="1.38884862" z3="-3.75288607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79199145" y3="-0.35535289" z3="-4.09871499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44122437" y3="-2.74164488" z3="-5.22688374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08521727" y3="-2.86373143" z3="-6.07175362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85091026" y3="-1.13930635" z3="-5.70989627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35963685" y3="-1.89071678" z3="5.04638269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31549034" y3="-3.72763996" z3="3.9382671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21995996" y3="-3.64320557" z3="-6.00684067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44205886" y3="-2.65583899" z3="-4.54368561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07253573" y3="1.16338179" z3="-1.48928647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11323761" y3="1.55119185" z3="-2.46958377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44131765" y3="1.49377359" z3="-1.68467916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8528248" y3="2.15951274" z3="-2.81326096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16638593" y3="1.1971594" z3="-0.92045985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90941683" y3="2.40373548" z3="-2.95518534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57519256" y3="2.22049039" z3="-3.63712066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90684794" y3="2.5159166" z3="-3.80413457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85521096" y3="2.49148959" z3="-4.41280226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23957481" y3="3.02544164" z3="-4.71323377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40681817" y3="3.15121677" z3="-3.33563643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29289936" y3="3.5639742" z3="-4.12472856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21521398" y3="4.16184695" z3="-2.74267154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96688346" y3="5.49485203" z3="-2.96895349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04251493" y3="3.87279445" z3="-2.09262756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60453683" y3="6.2500759" z3="-2.50094316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07085444" y3="4.94962664" z3="-4.35341354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89204517" y3="5.89858667" z3="-3.79609361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22058338" y3="5.24755989" z3="-4.97474027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70995123" y3="6.96186771" z3="-3.97584961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48052135" y3="-2.20294129" z3="-0.29386686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45118265" y3="-2.99380623" z3="-1.0625845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00802891" y3="-2.58711516" z3="0.59389571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09628002" y3="-1.38264853" z3="-0.7093994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17880017" y3="-1.42744605" z3="-1.14535234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3154113" y3="-0.38623707" z3="-1.491668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1025073" y3="-1.55252835" z3="-0.94026145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41917964" y3="-2.08048378" z3="-1.99730074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3403,.05,-.1928;7.3856,.1685,.4189;6.647,.4418,-.3409;4.7301,1.2349,-2.2632;4.3892,.4335,-1.1858;2.7306,.8451,-3.6643;3.636,1.7474,-3.1367;1.3854,2.5911,-4.6197;1.5636,1.2498,-4.3778;.507,2.9268,-5.1797;2.9254,-.4853,-3.4432;3.0988,.0445,-1.0035;2.4003,-1.098,-2.0032;.929,-.9658,-1.8295;3.1011,-2.4233,-1.8493;-.1436,-3.6164,.6741;-.0171,-5.2511,-4.7434;-.2454,-4.9952,-3.7053;-.8419,-4.3092,-1.0847;.7789,-4.5852,-2.854;-1.5603,-5.0886,-3.2463;-1.8593,-4.7403,-1.9315;.4928,-4.2569,-1.5273;1.812,-4.5039,-3.202;-2.3603,-5.4016,-3.9216;-2.896,-4.7798,-1.5871;-1.0312,-3.8625,.2366;-2.1714,-3.6506,.8821;-3.0591,-4.1142,.4488;-2.1657,-3.5157,2.3491;-2.222,-3.3336,5.1471;-3.3607,-3.7246,3.0531;-.9988,-3.221,3.0701;-1.0241,-3.1309,4.4588;-3.3881,-3.6357,4.4421;-4.275,-3.9673,2.5053;-.0405,-3.0826,2.5649;-.0954,-2.9216,4.9969;-4.3253,-3.81,4.9778;-2.2414,-3.271,6.2387;1.4134,-3.8914,-.6239;2.1722,-3.3886,-1.0776;.5224,.2452,-4.714;-3.0822,-1.7251,.0248;-2.9065,-.9753,1.1869;-1.8445,-.3256,1.5205;-.3748,.556,1.2219;-.4568,1.4526,-.406;.9836,-.6927,1.4019;-.3696,1.7506,2.6648;-3.8811,-.9663,2.0851;-3.6523,-.3532,3.344;-.2112,.7627,-1.2317;.3104,2.2492,-.4014;-1.4404,1.9276,-.5691;1.0152,-1.0557,2.4428;1.9541,-.2264,1.1616;.8615,-1.5364,.7034;-.4233,1.2125,3.6278;.5628,2.344,2.6627;-1.2162,2.4583,2.6133;-2.7911,-.8107,3.8566;-4.5678,-.5261,3.9256;-3.48,.729,3.2242;4.8406,-.7072,.9896;4.4116,-2.0331,.8495;3.759,-2.6794,1.892;3.5524,-1.9868,3.0813;4.0343,-.6961,3.2781;4.6866,-.0633,2.2246;4.5141,-2.5299,-.1171;3.36,-3.687,1.7671;2.6904,-2.5858,4.1052;3.8542,-.187,4.2255;5.0317,.9675,2.341;-.7935,.4658,-4.2855;-1.7741,-.5014,-4.4614;-1.4284,-1.6929,-5.0884;-.1434,-1.9237,-5.5695;.8302,-.9534,-5.3718;-1.0364,1.3888,-3.7529;-2.792,-.3554,-4.0987;-2.4412,-2.7416,-5.2269;.0852,-2.8637,-6.0718;1.8509,-1.1393,-5.7099;2.3596,-1.8907,5.0464;2.3155,-3.7276,3.9383;-2.22,-3.6432,-6.0068;-3.4421,-2.6558,-4.5437;7.0725,1.1634,-1.4893;6.1132,1.5512,-2.4696;8.4413,1.4938,-1.6847;8.8528,2.1595,-2.8133;9.1664,1.1972,-.9205;9.9094,2.4037,-2.9552;6.5752,2.2205,-3.6371;7.9068,2.5159,-3.8041;5.8552,2.4915,-4.4128;8.2396,3.0254,-4.7132;3.4068,3.1512,-3.3356;2.2929,3.564,-4.1247;4.2152,4.1618,-2.7427;3.9669,5.4949,-2.969;5.0425,3.8728,-2.0926;4.6045,6.2501,-2.5009;2.0709,4.9496,-4.3534;2.892,5.8986,-3.7961;1.2206,5.2476,-4.9747;2.71,6.9619,-3.9758;-4.4805,-2.2029,-.2939;-4.4512,-2.9938,-1.0626;-5.008,-2.5871,.5939;-5.0963,-1.3826,-.7094;-2.1788,-1.4274,-1.1454;-2.3154,-.3862,-1.4917;-1.1025,-1.5525,-.9403;-2.4192,-2.0805,-1.9973;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424921363</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001824887385 0.000216977710 0.018396896886 0.005342606865</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030733257 -0.000523546 -0.000021004 0.000063202 0.000142936 0.000324698 0.000375233 0.000434103 0.000602022 0.000836238 0.000888119 0.000982332 0.001209227 0.001272402 0.001410846 0.001477357 0.001530793 0.001735029 0.001787747 0.001911765 0.002114435 0.002284069 0.002409824 0.002497610 0.002689114 0.003050967 0.003067079 0.003222602 0.003558985 0.003865470 0.004453400 0.004713228 0.004766355 0.005118945 0.006019907 0.006064549 0.006316682 0.006667419 0.006894887 0.007615878 0.008080786 0.008152185 0.008415939 0.009424445 0.009729348 0.010076770 0.010126962 0.011160550 0.011945110 0.012213071 0.013025514 0.013115542 0.014234125 0.014845374 0.015390411 0.015696451 0.015978385 0.016692159 0.016777593 0.017508108 0.018246747 0.018797022 0.019376794 0.019622239 0.020205067 0.020717872 0.021237026 0.021409445 0.022264187 0.023123656 0.023848346 0.026476965 0.026891219 0.027869421 0.028206507 0.029576528 0.030451616 0.031618195 0.033278947 0.033717418 0.034151868 0.035777040 0.037171388 0.037402240 0.039495728 0.040029104 0.040232135 0.041066934 0.042580253 0.044710306 0.045634620 0.047140735 0.048037940 0.049284018 0.050509590 0.051080287 0.051303634 0.051684934 0.052490728 0.052763333 0.052958469 0.053232912 0.054835622 0.054984119 0.056116976 0.056358540 0.056577853 0.057040284 0.057237440 0.059212142 0.060617690 0.061066278 0.061841867 0.062417433 0.063420240 0.064537611 0.065318543 0.066002352 0.066615935 0.068407701 0.069180765 0.070281373 0.072789387 0.074448374 0.074804557 0.076528618 0.079093402 0.084495415 0.086948073 0.087180421 0.087643342 0.089687295 0.090679176 0.091488468 0.094265253 0.095009228 0.095849323 0.096494378 0.097867897 0.098846543 0.100227270 0.100811893 0.102243411 0.102962852 0.103234682 0.103808246 0.104496362 0.104900894 0.106359823 0.107061837 0.108223360 0.110019288 0.111179250 0.112467038 0.113559694 0.115097089 0.116281668 0.116846915 0.118762152 0.121343983 0.122485044 0.123741906 0.125294298 0.126245841 0.126341572 0.126775459 0.127617601 0.132155174 0.135109793 0.135874865 0.143108978 0.143991153 0.147095381 0.147656076 0.149766755 0.151908495 0.154673433 0.155016172 0.156672157 0.161388156 0.162002495 0.173785157 0.174426906 0.181833724 0.185211490 0.186478274 0.189671960 0.190449547 0.194434444 0.195720159 0.198921408 0.200372317 0.205234730 0.207161705 0.207436061 0.210286040 0.216626498 0.217147819 0.217966861 0.219951108 0.220889759 0.225407877 0.226747345 0.232400361 0.235189519 0.235719102 0.236096057 0.244748307 0.256133941 0.257341386 0.264006733 0.269978682 0.280782421 0.283535016 0.286362153 0.291980877 0.297039342 0.304494269 0.306015720 0.307323410 0.314522045 0.316830356 0.317445952 0.322258761 0.330166362 0.332933419 0.351844850 0.353003131 0.355114799 0.355955345 0.360089139 0.363087879 0.364589888 0.384185020 0.386059269 0.392250797 0.410576136 0.426067806 0.431257847 0.462496362 0.469211390 0.479115293 0.484567834 0.484626251 0.487544584 0.491494362 0.509685630 0.515580922 0.535394806 0.569312394 0.575374566 0.591550371 0.594243380 0.607353926 0.608432253 0.644967527 0.647851567 0.649766953 0.674437515 0.678442941 0.687835234 0.693226353 0.693743452 0.700275782 0.704814486 0.718488606 0.742273832 0.751443741 0.759460820 0.772077486 0.774605742 0.779699530 0.811018379 0.816466980 0.820179289 0.823127762 0.823738198 0.832267805 0.835036874 0.837871898 0.842638643 0.845958501 0.847680078 0.850229926 0.859738038 0.865952060 0.868896977 0.874698245 0.886211379 0.887748418 0.889784976 0.900814632 0.901111028 0.904184335 0.924098809 0.928230232 0.936592183 0.938047513 0.966384854 0.976500125 0.987383105 1.001764091 1.020337126 1.028780163 1.042574920 1.052172017 1.058301042 1.068954431 1.087002152 1.088956536 1.105201370 1.110484642 1.112793277 1.127657843 1.136349154 1.141165982 1.145149120 1.176626888 1.179188059 1.181844144 1.187363850 1.191637754 1.198435479 1.224761175 1.229009587 1.274776819 1.302836960 1.321408625 1.328432753 1.333275087 1.336602864 1.338113016 1.342181170 1.344054338 1.345139534 1.359831254 1.379686915 1.383394231 1.385850138 1.409121654 1.420927464 1.431464140 1.551511313 1.686377644 1.776433881</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">299</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33773798" y3="0.04819549" z3="-0.19413135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38168421" y3="0.16772891" z3="0.42059555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6439624" y3="0.44227754" z3="-0.33951009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72880589" y3="1.23675195" z3="-2.26290079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38749242" y3="0.43284719" z3="-1.18745488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73173857" y3="0.84681974" z3="-3.66691725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63567806" y3="1.74889009" z3="-3.13770422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38662058" y3="2.59141085" z3="-4.62391675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56524407" y3="1.25096394" z3="-4.38151813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50866359" y3="2.92684727" z3="-5.18473353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92742577" y3="-0.48368783" z3="-3.44727244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09745171" y3="0.04209353" z3="-1.00692946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39946607" y3="-1.09845609" z3="-2.00928188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92802944" y3="-0.964892" z3="-1.83779896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09835208" y3="-2.42490458" z3="-1.85628972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14306002" y3="-3.62174453" z3="0.67905021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03104997" y3="-5.24834436" z3="-4.74243613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25581827" y3="-4.99513447" z3="-3.70281636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84570444" y3="-4.31355412" z3="-1.07910483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77120784" y3="-4.58502524" z3="-2.85408662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.5699725" y3="-5.09118189" z3="-3.23944775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86568308" y3="-4.74573539" z3="-1.92318189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48817775" y3="-4.25873307" z3="-1.52617697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80126735" y3="-4.49676219" z3="-3.20490153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36876314" y3="-5.40837594" z3="-3.91212382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8997973" y3="-4.79153899" z3="-1.57522034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03269376" y3="-3.86571779" z3="0.24233928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17242427" y3="-3.65043077" z3="0.88789856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06023399" y3="-4.11448478" z3="0.45631163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16599958" y3="-3.51259744" z3="2.3547344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22180687" y3="-3.32126269" z3="5.15218494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36159641" y3="-3.71557809" z3="3.05952306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99812819" y3="-3.22004211" z3="3.07477453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0233852" y3="-3.12501535" z3="4.46314912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38854825" y3="-3.62212266" z3="4.44821712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27774122" y3="-3.95564118" z3="2.51246789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03867565" y3="-3.08843871" z3="2.56894001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09321148" y3="-2.91841169" z3="5.00048609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32623122" y3="-3.79155605" z3="4.98454166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2410221" y3="-3.25504328" z3="6.24359342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40949962" y3="-3.88950245" z3="-0.62582981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16868983" y3="-3.38882064" z3="-1.08216162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52521291" y3="0.24499544" z3="-4.71930889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0787592" y3="-1.72711342" z3="0.02598431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9048427" y3="-0.97368782" z3="1.18634567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84348229" y3="-0.32274723" z3="1.51958013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3705157" y3="0.55344934" z3="1.21931767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45321412" y3="1.45168991" z3="-0.40743115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98435332" y3="-0.69973692" z3="1.39603853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3580988" y3="1.74649391" z3="2.66353398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88071921" y3="-0.96207096" z3="2.08308814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65398767" y3="-0.34472346" z3="3.3404528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20942817" y3="0.76247842" z3="-1.23397834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31573851" y3="2.24687524" z3="-0.40290843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43616136" y3="1.92848808" z3="-0.56911028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01593014" y3="-1.06377899" z3="2.43635778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95627937" y3="-0.23541046" z3="1.15579017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86019526" y3="-1.54256376" z3="0.69687162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41329273" y3="1.20782023" z3="3.62612082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57748325" y3="2.3348515" z3="2.66065538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20078377" y3="2.45884062" z3="2.61393513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79304528" y3="-0.80032015" z3="3.85564883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56996694" y3="-0.51659595" z3="3.92090059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48235825" y3="0.73703368" z3="3.21726646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8377414" y3="-0.71180869" z3="0.98630907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40734612" y3="-2.03700265" z3="0.84318494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75588411" y3="-2.68546118" z3="1.88499706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55190945" y3="-1.99599573" z3="3.07671762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0348704" y3="-0.70613955" z3="3.2761106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68613464" y3="-0.07109099" z3="2.22337742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50952206" y3="-2.53182927" z3="-0.12371499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35661559" y3="-3.69244887" z3="1.75836947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6914689" y3="-2.59710329" z3="4.10070662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85680064" y3="-0.1995651" z3="4.22534295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03326895" y3="0.95917563" z3="2.34292206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79052417" y3="0.46357421" z3="-4.28993911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76985081" y3="-0.50520903" z3="-4.46548326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42297399" y3="-1.69594515" z3="-5.09298587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13819873" y3="-1.92481094" z3="-5.57588018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83422336" y3="-0.9528098" z3="-5.37813928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03421508" y3="1.38595105" z3="-3.75649513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78717394" y3="-0.36071705" z3="-4.10106159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43436996" y3="-2.74602847" z3="-5.23032217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09140538" y3="-2.86428059" z3="-6.07882461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85510809" y3="-1.13682177" z3="-5.71720023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36543518" y3="-1.90525642" z3="5.0454453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31181401" y3="-3.73704711" z3="3.92927109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21135267" y3="-3.64919366" z3="-6.00772231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43621604" y3="-2.66004246" z3="-4.5477433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.0700817" y3="1.16783627" z3="-1.48532268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1117575" y3="1.5561217" z3="-2.46632326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43860255" y3="1.50228682" z3="-1.67733929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85063813" y3="2.17133547" z3="-2.8037077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16285979" y3="1.20526025" z3="-0.91254418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90673449" y3="2.4177174" z3="-2.94329305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57436261" y3="2.22876592" z3="-3.63168729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90568759" y3="2.52760624" z3="-3.79562939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8552837" y3="2.50017929" z3="-4.40800426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2387437" y3="3.03784496" z3="-4.70346062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40506835" y3="3.15270376" z3="-3.33569148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29224115" y3="3.56484328" z3="-4.126671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21031506" y3="4.16433229" z3="-2.73927795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96091539" y3="5.49697661" z3="-2.96529912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0362651" y3="3.87609126" z3="-2.08714577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59594868" y3="6.25313359" z3="-2.494321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06821499" y3="4.95111599" z3="-4.353762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88769662" y3="5.89983929" z3="-3.79496734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21911156" y3="5.24827892" z3="-4.97707088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70489458" y3="6.96291204" z3="-3.97450099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47681871" y3="-2.20439555" z3="-0.29427612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44663473" y3="-2.99741888" z3="-1.06069642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00674597" y3="-2.58578243" z3="0.59350374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09038246" y3="-1.38445394" z3="-0.71326045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1736467" y3="-1.43168423" z3="-1.14359569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30964017" y3="-0.3915904" z3="-1.4919713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09727928" y3="-1.55765387" z3="-0.93788714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41446967" y3="-2.08598604" z3="-1.99518999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3377,.0482,-.1941;7.3817,.1677,.4206;6.644,.4423,-.3395;4.7288,1.2368,-2.2629;4.3875,.4328,-1.1875;2.7317,.8468,-3.6669;3.6357,1.7489,-3.1377;1.3866,2.5914,-4.6239;1.5652,1.251,-4.3815;.5087,2.9268,-5.1847;2.9274,-.4837,-3.4473;3.0975,.0421,-1.0069;2.3995,-1.0985,-2.0093;.928,-.9649,-1.8378;3.0984,-2.4249,-1.8563;-.1431,-3.6217,.6791;-.031,-5.2483,-4.7424;-.2558,-4.9951,-3.7028;-.8457,-4.3136,-1.0791;.7712,-4.585,-2.8541;-1.57,-5.0912,-3.2394;-1.8657,-4.7457,-1.9232;.4882,-4.2587,-1.5262;1.8013,-4.4968,-3.2049;-2.3688,-5.4084,-3.9121;-2.8998,-4.7915,-1.5752;-1.0327,-3.8657,.2423;-2.1724,-3.6504,.8879;-3.0602,-4.1145,.4563;-2.166,-3.5126,2.3547;-2.2218,-3.3213,5.1522;-3.3616,-3.7156,3.0595;-.9981,-3.22,3.0748;-1.0234,-3.125,4.4631;-3.3885,-3.6221,4.4482;-4.2777,-3.9556,2.5125;-.0387,-3.0884,2.5689;-.0932,-2.9184,5.0005;-4.3262,-3.7916,4.9845;-2.241,-3.255,6.2436;1.4095,-3.8895,-.6258;2.1687,-3.3888,-1.0822;.5252,.245,-4.7193;-3.0788,-1.7271,.026;-2.9048,-.9737,1.1863;-1.8435,-.3227,1.5196;-.3705,.5534,1.2193;-.4532,1.4517,-.4074;.9844,-.6997,1.396;-.3581,1.7465,2.6635;-3.8807,-.9621,2.0831;-3.654,-.3447,3.3405;-.2094,.7625,-1.234;.3157,2.2469,-.4029;-1.4362,1.9285,-.5691;1.0159,-1.0638,2.4364;1.9563,-.2354,1.1558;.8602,-1.5426,.6969;-.4133,1.2078,3.6261;.5775,2.3349,2.6607;-1.2008,2.4588,2.6139;-2.793,-.8003,3.8556;-4.57,-.5166,3.9209;-3.4824,.737,3.2173;4.8377,-.7118,.9863;4.4073,-2.037,.8432;3.7559,-2.6855,1.885;3.5519,-1.996,3.0767;4.0349,-.7061,3.2761;4.6861,-.0711,2.2234;4.5095,-2.5318,-.1237;3.3566,-3.6924,1.7584;2.6915,-2.5971,4.1007;3.8568,-.1996,4.2253;5.0333,.9592,2.3429;-.7905,.4636,-4.2899;-1.7699,-.5052,-4.4655;-1.423,-1.6959,-5.093;-.1382,-1.9248,-5.5759;.8342,-.9528,-5.3781;-1.0342,1.386,-3.7565;-2.7872,-.3607,-4.1011;-2.4344,-2.746,-5.2303;.0914,-2.8643,-6.0788;1.8551,-1.1368,-5.7172;2.3654,-1.9053,5.0454;2.3118,-3.737,3.9293;-2.2114,-3.6492,-6.0077;-3.4362,-2.66,-4.5477;7.0701,1.1678,-1.4853;6.1118,1.5561,-2.4663;8.4386,1.5023,-1.6773;8.8506,2.1713,-2.8037;9.1629,1.2053,-.9125;9.9067,2.4177,-2.9433;6.5744,2.2288,-3.6317;7.9057,2.5276,-3.7956;5.8553,2.5002,-4.408;8.2387,3.0378,-4.7035;3.4051,3.1527,-3.3357;2.2922,3.5648,-4.1267;4.2103,4.1643,-2.7393;3.9609,5.497,-2.9653;5.0363,3.8761,-2.0871;4.5959,6.2531,-2.4943;2.0682,4.9511,-4.3538;2.8877,5.8998,-3.795;1.2191,5.2483,-4.9771;2.7049,6.9629,-3.9745;-4.4768,-2.2044,-.2943;-4.4466,-2.9974,-1.0607;-5.0067,-2.5858,.5935;-5.0904,-1.3845,-.7133;-2.1736,-1.4317,-1.1436;-2.3096,-.3916,-1.492;-1.0973,-1.5577,-.9379;-2.4145,-2.086,-1.9952;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420072396</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002276710567 0.000267884167 0.022786348499 0.005343408408</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030737308 -0.000219047 0.000036702 0.000063064 0.000160133 0.000324393 0.000372651 0.000432927 0.000601731 0.000835800 0.000889276 0.000983002 0.001209112 0.001275997 0.001411475 0.001477760 0.001537375 0.001737268 0.001787736 0.001915139 0.002114574 0.002283868 0.002410363 0.002497570 0.002689147 0.003050691 0.003066910 0.003222577 0.003559516 0.003865554 0.004453474 0.004713086 0.004766123 0.005119690 0.006019869 0.006065805 0.006317234 0.006667896 0.006894727 0.007615677 0.008080634 0.008152094 0.008416238 0.009424602 0.009729884 0.010077114 0.010126994 0.011160505 0.011945089 0.012213021 0.013026777 0.013115846 0.014240162 0.014845983 0.015390185 0.015696761 0.015979843 0.016694836 0.016777557 0.017508932 0.018251282 0.018800455 0.019377344 0.019622711 0.020205456 0.020718400 0.021236961 0.021410207 0.022264882 0.023123673 0.023848927 0.026477016 0.026891830 0.027879161 0.028211706 0.029578462 0.030455831 0.031619863 0.033279174 0.033721670 0.034153667 0.035777162 0.037172822 0.037405900 0.039496259 0.040029260 0.040232386 0.041078731 0.042582285 0.044713991 0.045643970 0.047140863 0.048038453 0.049284284 0.050509494 0.051080285 0.051304282 0.051684864 0.052491131 0.052775146 0.052958503 0.053235668 0.054835574 0.054984151 0.056119457 0.056359496 0.056579470 0.057040396 0.057238389 0.059211917 0.060623411 0.061067111 0.061844196 0.062417538 0.063420303 0.064537776 0.065319690 0.066003208 0.066616094 0.068408029 0.069184241 0.070282127 0.072789923 0.074453545 0.074804721 0.076528658 0.079110738 0.084508132 0.086948472 0.087181982 0.087647106 0.089712063 0.090680828 0.091488784 0.094268833 0.095016144 0.095849690 0.096494938 0.097867978 0.098847222 0.100227286 0.100817256 0.102305776 0.103088952 0.103253346 0.103824770 0.104498713 0.104915217 0.106362563 0.107065928 0.108233553 0.110024580 0.111183352 0.112467074 0.113559939 0.115097167 0.116282484 0.116849027 0.118763580 0.121345088 0.122491538 0.123744915 0.125311535 0.126247296 0.126345573 0.126775491 0.127625706 0.132157177 0.135109541 0.135877909 0.143129262 0.144007547 0.147095370 0.147659545 0.149766882 0.151910072 0.154673449 0.155018782 0.156671456 0.161388032 0.162002488 0.173790240 0.174435803 0.181834762 0.185211573 0.186478259 0.189676018 0.190449002 0.194448042 0.195732702 0.198934160 0.200372169 0.205234334 0.207165816 0.207437134 0.210286207 0.216656717 0.217153041 0.217967835 0.219954154 0.220889739 0.225410403 0.226750648 0.232400336 0.235190007 0.235719594 0.236097606 0.244748475 0.256134043 0.257345119 0.264007072 0.269978783 0.280785180 0.283554925 0.286362523 0.291982057 0.297039959 0.304494385 0.306016667 0.307323866 0.314526006 0.316830378 0.317446238 0.322259256 0.330172900 0.332933396 0.351845716 0.353012637 0.355116062 0.355956313 0.360089153 0.363090326 0.364595246 0.384200959 0.386060742 0.392250700 0.410576454 0.426067687 0.431258366 0.462499410 0.469220098 0.479130983 0.484578107 0.484628294 0.487548108 0.491495459 0.509686655 0.515583991 0.535400358 0.569317946 0.575379705 0.591560358 0.594247162 0.607358165 0.608434257 0.644967509 0.647853543 0.649769263 0.674438331 0.678443783 0.687949702 0.693321495 0.693779103 0.700282518 0.704825417 0.718488610 0.742273869 0.751444621 0.759462163 0.772077487 0.774608988 0.779706053 0.811020743 0.816467693 0.820186488 0.823130987 0.823739646 0.832284440 0.835036880 0.837875649 0.842647727 0.845959116 0.847680025 0.850229995 0.859770015 0.865952374 0.868948960 0.874698302 0.886227875 0.887792965 0.889790218 0.900815009 0.901111784 0.904184916 0.924098806 0.928245004 0.936595400 0.938071995 0.966386476 0.976534959 0.987391326 1.001766478 1.020349866 1.028791136 1.042588244 1.052244566 1.058323378 1.068978040 1.087002393 1.088969786 1.105215457 1.110870921 1.112793304 1.127671190 1.136376498 1.141176879 1.145164047 1.176656041 1.179190981 1.181849952 1.187376503 1.191640973 1.198471766 1.224764336 1.229015052 1.274775418 1.302841125 1.321409063 1.328435560 1.333275155 1.336611610 1.338143007 1.342191540 1.344054816 1.345139503 1.359831736 1.379688563 1.383395232 1.385857222 1.409147475 1.420954166 1.431499591 1.551511621 1.686436430 1.776467738</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">300</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33734066" y3="0.04910382" z3="-0.19379525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38143336" y3="0.17367636" z3="0.42202872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64317736" y3="0.4462174" z3="-0.33852021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72677996" y3="1.23684643" z3="-2.26231056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38647695" y3="0.43201614" z3="-1.18731979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73111339" y3="0.84413043" z3="-3.66773148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63278924" y3="1.74790974" z3="-3.13666909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38243314" y3="2.58815984" z3="-4.62194625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56424574" y3="1.24686082" z3="-4.38250278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50402425" y3="2.92231416" z3="-5.18281162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92898934" y3="-0.48614535" z3="-3.44823721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09688241" y3="0.03965922" z3="-1.00739275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40026919" y3="-1.10110138" z3="-2.01053913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92860818" y3="-0.96809142" z3="-1.84050187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09942669" y3="-2.42711779" z3="-1.85621731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14587392" y3="-3.62022187" z3="0.67943637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03161082" y3="-5.25196555" z3="-4.74008276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25726577" y3="-4.99706669" z3="-3.70114698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84743047" y3="-4.31296125" z3="-1.07852913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76839712" y3="-4.58447859" z3="-2.85316813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57048292" y3="-5.09421364" z3="-3.23791204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86621793" y3="-4.74712576" z3="-1.92199758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4857086" y3="-4.25730299" z3="-1.5254915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80014972" y3="-4.4997649" z3="-3.20452358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37155725" y3="-5.40921222" z3="-3.91076809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90166032" y3="-4.79019021" z3="-1.57383715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0344246" y3="-3.86513083" z3="0.2429123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17394664" y3="-3.64672313" z3="0.88784625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06338601" y3="-4.10809137" z3="0.45605759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16791523" y3="-3.50761097" z3="2.35456502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22391509" y3="-3.3144051" z3="5.15207617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3649484" y3="-3.70451749" z3="3.05880059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.998866" y3="-3.22050136" z3="3.07527982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0240857" y3="-3.12458869" z3="4.46366541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3921558" y3="-3.60989823" z3="4.44744023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28102944" y3="-3.94191263" z3="2.51150119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03894991" y3="-3.09342959" z3="2.57034931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09366383" y3="-2.92130749" z3="5.00125343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33097936" y3="-3.77451712" z3="4.98330011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24338503" y3="-3.24713881" z3="6.24344924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40838716" y3="-3.88946665" z3="-0.62507867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16762696" y3="-3.38952485" z3="-1.08125763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52572188" y3="0.24020603" z3="-4.72096766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07699768" y3="-1.72142777" z3="0.02455249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90321401" y3="-0.96716958" z3="1.18433529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84221272" y3="-0.31587312" z3="1.51813539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36252894" y3="0.54943408" z3="1.21849084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43982875" y3="1.45243549" z3="-0.4060518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98479523" y3="-0.71240424" z3="1.3911357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33997074" y3="1.73868101" z3="2.66562079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88009672" y3="-0.95392672" z3="2.07989317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65449353" y3="-0.33506803" z3="3.33642328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20463667" y3="0.76303043" z3="-1.23509924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33680446" y3="2.23985784" z3="-0.40132926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41839017" y3="1.93960268" z3="-0.56404949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01571542" y3="-1.07822447" z3="2.43063506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95787182" y3="-0.25160431" z3="1.15060545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8561553" y3="-1.55315581" z3="0.69018642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39692757" y3="1.19741694" z3="3.62669369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59977572" y3="2.3205585" z3="2.66262863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17799742" y3="2.45671105" z3="2.61948806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79467805" y3="-0.79054122" z3="3.85338544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57140701" y3="-0.5052752" z3="3.91610014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48177321" y3="0.7465442" z3="3.21208333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83856846" y3="-0.71214944" z3="0.98644894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41276623" y3="-2.03871464" z3="0.84334034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76128576" y3="-2.68870335" z3="1.88424912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55308774" y3="-1.9993485" z3="3.07516864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03197753" y3="-0.70803859" z3="3.27491719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68272608" y3="-0.07135574" z3="2.22277435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51641112" y3="-2.53311441" z3="-0.12439821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36432629" y3="-3.69672183" z3="1.75691153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69204035" y3="-2.60217619" z3="4.0976972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85059579" y3="-0.20168744" z3="4.22357861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0251876" y3="0.96006727" z3="2.34141363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79078964" y3="0.45766842" z3="-4.29284043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76911751" y3="-0.51163931" z3="-4.46906314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42056099" y3="-1.70222704" z3="-5.0962189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13490795" y3="-1.9299663" z3="-5.57744713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83641526" y3="-0.95732702" z3="-5.3791462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03582155" y3="1.37982994" z3="-3.75958681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78727313" y3="-0.36811838" z3="-4.10619458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43100749" y3="-2.75323027" z3="-5.23452704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09611335" y3="-2.86932419" z3="-6.07991836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85764777" y3="-1.14070243" z3="-5.71727735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36719278" y3="-1.91250287" z3="5.04479697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31176889" y3="-3.74124872" z3="3.92386417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2067422" y3="-3.655746" z3="-6.01247041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43304812" y3="-2.66820899" z3="-4.55290227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06829915" y3="1.1720087" z3="-1.48426995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10928795" y3="1.5585592" z3="-2.46541261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4363404" y3="1.50775665" z3="-1.67621659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84748406" y3="2.17767068" z3="-2.80223772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16112309" y3="1.21168738" z3="-0.91147471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90352743" y3="2.42617854" z3="-2.94147186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57097224" y3="2.23233107" z3="-3.63029875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90192987" y3="2.53320752" z3="-3.79389006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85137641" y3="2.5026242" z3="-4.40662765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23446905" y3="3.0464166" z3="-4.70090632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39916888" y3="3.15163713" z3="-3.33234013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28555183" y3="3.56275744" z3="-4.12268392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20236233" y3="4.16352139" z3="-2.73441456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94920589" y3="5.49634536" z3="-2.9567748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0292474" y3="3.87562368" z3="-2.08334899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58283043" y3="6.25238634" z3="-2.48493518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05861263" y3="4.94837729" z3="-4.34741675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87472116" y3="5.89867012" z3="-3.78504955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20858242" y3="5.24507414" z3="-4.96965929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68866661" y3="6.96188009" z3="-3.96152289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47544263" y3="-2.19742411" z3="-0.29626543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44540228" y3="-2.99089614" z3="-1.06206155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00640991" y3="-2.57750809" z3="0.59125167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08804045" y3="-1.37726091" z3="-0.71647076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17112246" y3="-1.42811216" z3="-1.14496057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30469844" y3="-0.38737297" z3="-1.49357926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09530675" y3="-1.5552724" z3="-0.938659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41171101" y3="-2.08249242" z3="-1.99608085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3373,.0491,-.1938;7.3814,.1737,.422;6.6432,.4462,-.3385;4.7268,1.2368,-2.2623;4.3865,.432,-1.1873;2.7311,.8441,-3.6677;3.6328,1.7479,-3.1367;1.3824,2.5882,-4.6219;1.5642,1.2469,-4.3825;.504,2.9223,-5.1828;2.929,-.4861,-3.4482;3.0969,.0397,-1.0074;2.4003,-1.1011,-2.0105;.9286,-.9681,-1.8405;3.0994,-2.4271,-1.8562;-.1459,-3.6202,.6794;-.0316,-5.252,-4.7401;-.2573,-4.9971,-3.7011;-.8474,-4.313,-1.0785;.7684,-4.5845,-2.8532;-1.5705,-5.0942,-3.2379;-1.8662,-4.7471,-1.922;.4857,-4.2573,-1.5255;1.8001,-4.4998,-3.2045;-2.3716,-5.4092,-3.9108;-2.9017,-4.7902,-1.5738;-1.0344,-3.8651,.2429;-2.1739,-3.6467,.8878;-3.0634,-4.1081,.4561;-2.1679,-3.5076,2.3546;-2.2239,-3.3144,5.1521;-3.3649,-3.7045,3.0588;-.9989,-3.2205,3.0753;-1.0241,-3.1246,4.4637;-3.3922,-3.6099,4.4474;-4.281,-3.9419,2.5115;-.0389,-3.0934,2.5703;-.0937,-2.9213,5.0013;-4.331,-3.7745,4.9833;-2.2434,-3.2471,6.2434;1.4084,-3.8895,-.6251;2.1676,-3.3895,-1.0813;.5257,.2402,-4.721;-3.077,-1.7214,.0246;-2.9032,-.9672,1.1843;-1.8422,-.3159,1.5181;-.3625,.5494,1.2185;-.4398,1.4524,-.4061;.9848,-.7124,1.3911;-.34,1.7387,2.6656;-3.8801,-.9539,2.0799;-3.6545,-.3351,3.3364;-.2046,.763,-1.2351;.3368,2.2399,-.4013;-1.4184,1.9396,-.564;1.0157,-1.0782,2.4306;1.9579,-.2516,1.1506;.8562,-1.5532,.6902;-.3969,1.1974,3.6267;.5998,2.3206,2.6626;-1.178,2.4567,2.6195;-2.7947,-.7905,3.8534;-4.5714,-.5053,3.9161;-3.4818,.7465,3.2121;4.8386,-.7121,.9864;4.4128,-2.0387,.8433;3.7613,-2.6887,1.8842;3.5531,-1.9993,3.0752;4.032,-.708,3.2749;4.6827,-.0714,2.2228;4.5164,-2.5331,-.1244;3.3643,-3.6967,1.7569;2.692,-2.6022,4.0977;3.8506,-.2017,4.2236;5.0252,.9601,2.3414;-.7908,.4577,-4.2928;-1.7691,-.5116,-4.4691;-1.4206,-1.7022,-5.0962;-.1349,-1.93,-5.5774;.8364,-.9573,-5.3791;-1.0358,1.3798,-3.7596;-2.7873,-.3681,-4.1062;-2.431,-2.7532,-5.2345;.0961,-2.8693,-6.0799;1.8576,-1.1407,-5.7173;2.3672,-1.9125,5.0448;2.3118,-3.7412,3.9239;-2.2067,-3.6557,-6.0125;-3.433,-2.6682,-4.5529;7.0683,1.172,-1.4843;6.1093,1.5586,-2.4654;8.4363,1.5078,-1.6762;8.8475,2.1777,-2.8022;9.1611,1.2117,-.9115;9.9035,2.4262,-2.9415;6.571,2.2323,-3.6303;7.9019,2.5332,-3.7939;5.8514,2.5026,-4.4066;8.2345,3.0464,-4.7009;3.3992,3.1516,-3.3323;2.2856,3.5628,-4.1227;4.2024,4.1635,-2.7344;3.9492,5.4963,-2.9568;5.0292,3.8756,-2.0833;4.5828,6.2524,-2.4849;2.0586,4.9484,-4.3474;2.8747,5.8987,-3.785;1.2086,5.2451,-4.9697;2.6887,6.9619,-3.9615;-4.4754,-2.1974,-.2963;-4.4454,-2.9909,-1.0621;-5.0064,-2.5775,.5913;-5.088,-1.3773,-.7165;-2.1711,-1.4281,-1.145;-2.3047,-.3874,-1.4936;-1.0953,-1.5553,-.9387;-2.4117,-2.0825,-1.9961;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420498636</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001573609017 0.000208392225 0.020628746473 0.005370663823</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030737498 -0.000349220 -0.000003812 0.000059890 0.000173555 0.000329562 0.000345210 0.000438727 0.000602421 0.000834039 0.000890278 0.000982432 0.001208865 0.001277927 0.001411749 0.001487363 0.001552000 0.001734335 0.001789492 0.001916628 0.002111491 0.002285873 0.002409301 0.002498849 0.002689045 0.003055739 0.003066722 0.003212623 0.003562057 0.003866876 0.004449844 0.004693376 0.004766165 0.005117782 0.006014264 0.006059917 0.006310949 0.006668062 0.006889608 0.007609779 0.008064244 0.008153815 0.008413215 0.009424371 0.009723950 0.010071636 0.010128260 0.011158224 0.011934660 0.012210384 0.013028189 0.013120692 0.014257821 0.014843875 0.015391935 0.015701389 0.015975503 0.016688077 0.016767966 0.017507326 0.018249850 0.018807111 0.019374946 0.019623435 0.020205944 0.020720073 0.021237855 0.021411002 0.022262149 0.023123578 0.023844747 0.026476882 0.026892368 0.027893394 0.028215695 0.029579446 0.030463778 0.031621893 0.033274536 0.033723396 0.034154314 0.035777684 0.037174935 0.037410159 0.039501591 0.040022084 0.040234475 0.041086301 0.042590926 0.044715311 0.045653820 0.047143537 0.048038075 0.049284325 0.050509354 0.051083541 0.051306281 0.051684855 0.052491697 0.052783226 0.052958396 0.053240139 0.054833508 0.054984757 0.056119500 0.056360137 0.056584924 0.057042815 0.057238347 0.059214024 0.060634740 0.061068296 0.061845615 0.062418112 0.063420199 0.064537547 0.065320716 0.066004523 0.066618236 0.068408492 0.069190675 0.070283671 0.072789888 0.074456061 0.074804902 0.076529356 0.079129988 0.084530323 0.086950780 0.087183395 0.087651395 0.089727200 0.090681019 0.091493111 0.094271788 0.095022265 0.095851581 0.096496548 0.097867988 0.098848105 0.100228469 0.100823514 0.102346248 0.103180403 0.103326606 0.103854095 0.104505982 0.104934460 0.106363559 0.107066802 0.108239699 0.110030767 0.111186950 0.112467567 0.113569702 0.115097319 0.116283995 0.116851631 0.118766699 0.121346646 0.122495578 0.123749033 0.125313489 0.126247123 0.126348372 0.126775703 0.127651359 0.132156816 0.135108901 0.135879075 0.143134219 0.144027188 0.147095189 0.147659511 0.149768075 0.151906502 0.154674426 0.155019932 0.156673610 0.161388789 0.162002684 0.173793528 0.174447606 0.181847081 0.185214507 0.186485268 0.189675400 0.190448375 0.194452526 0.195738662 0.198941810 0.200372962 0.205234304 0.207167705 0.207438711 0.210287129 0.216686464 0.217153978 0.217968660 0.219963793 0.220890115 0.225411168 0.226752413 0.232400134 0.235193692 0.235719790 0.236101620 0.244748332 0.256134463 0.257348875 0.264007383 0.269979354 0.280786944 0.283579292 0.286364933 0.291982257 0.297042234 0.304494436 0.306018129 0.307323740 0.314529920 0.316829985 0.317446393 0.322259670 0.330175214 0.332933148 0.351846476 0.353017351 0.355117456 0.355959125 0.360089831 0.363090945 0.364600284 0.384205696 0.386060345 0.392251014 0.410577049 0.426068127 0.431265161 0.462502153 0.469225912 0.479133239 0.484586443 0.484632345 0.487548703 0.491493741 0.509687111 0.515583636 0.535402834 0.569322621 0.575382910 0.591563734 0.594250544 0.607361554 0.608437844 0.644973468 0.647860932 0.649768630 0.674444395 0.678445735 0.688035819 0.693387760 0.693825587 0.700288808 0.704834481 0.718491280 0.742273881 0.751445330 0.759463411 0.772077336 0.774628904 0.779715566 0.811022649 0.816468568 0.820186026 0.823133032 0.823740109 0.832295959 0.835038488 0.837882830 0.842660358 0.845960327 0.847685258 0.850231921 0.859778972 0.865952486 0.868950600 0.874702121 0.886229888 0.887864224 0.889789943 0.900817824 0.901112713 0.904185197 0.924100413 0.928247339 0.936596781 0.938097037 0.966387093 0.976578376 0.987396146 1.001766857 1.020359343 1.028805840 1.042598701 1.052320319 1.058357965 1.068995667 1.087003470 1.088981915 1.105229116 1.111105480 1.112794055 1.127671342 1.136396742 1.141193118 1.145182418 1.176681494 1.179191742 1.181852161 1.187394155 1.191645175 1.198488729 1.224764775 1.229015221 1.274783262 1.302858249 1.321408693 1.328439857 1.333279940 1.336629374 1.338164394 1.342207603 1.344053696 1.345139749 1.359841861 1.379688429 1.383407572 1.385858680 1.409168595 1.420976006 1.431508772 1.551511822 1.686461451 1.776474172</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">301</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33746079" y3="0.0527465" z3="-0.19152871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38063367" y3="0.17726797" z3="0.42307253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64234813" y3="0.44958875" z3="-0.33719365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72546796" y3="1.23859209" z3="-2.2608993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38619032" y3="0.43450111" z3="-1.18495628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73037328" y3="0.84134738" z3="-3.66596394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63115635" y3="1.74667658" z3="-3.13657189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38130644" y3="2.58143566" z3="-4.62552411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56336328" y3="1.24170057" z3="-4.38186035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5029073" y3="2.91392666" z3="-5.187412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92965317" y3="-0.48848471" z3="-3.44448454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09707231" y3="0.04057966" z3="-1.00421329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40060232" y3="-1.10155912" z3="-2.00608319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92885991" y3="-0.9676349" z3="-1.83702371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09919357" y3="-2.42767511" z3="-1.84976097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14856432" y3="-3.62048633" z3="0.67731403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.03122587" y3="-5.25332656" z3="-4.74166193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25725461" y3="-4.99770649" z3="-3.70290801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.85001805" y3="-4.31115297" z3="-1.08128139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.76919664" y3="-4.58774717" z3="-2.85328945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.57210753" y3="-5.09114531" z3="-3.24145173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86943751" y3="-4.74270893" z3="-1.9263121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48470165" y3="-4.25931233" z3="-1.52628588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80012872" y3="-4.50200969" z3="-3.20262145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.37053605" y3="-5.4082864" z3="-3.91484458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90432657" y3="-4.78624626" z3="-1.5800095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03791943" y3="-3.8624927" z3="0.23970332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17754794" y3="-3.64341484" z3="0.8840126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06689766" y3="-4.10287053" z3="0.45078654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17187988" y3="-3.50706644" z3="2.3510321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22932871" y3="-3.3154463" z3="5.1484973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36968582" y3="-3.70114626" z3="3.05453919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00253018" y3="-3.22442166" z3="3.07257295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02848169" y3="-3.12904226" z3="4.46085745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39739641" y3="-3.60763142" z3="4.44318161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28702288" y3="-3.93407978" z3="2.50654999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04118431" y3="-3.10160436" z3="2.56821793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09714491" y3="-2.9295721" z3="4.99889944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33707642" y3="-3.76960455" z3="4.97844334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2493899" y3="-3.24884554" z3="6.23983558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40528179" y3="-3.89159399" z3="-0.62461043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16581186" y3="-3.39148936" z3="-1.07892874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52537997" y3="0.2338275" z3="-4.72020112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07536055" y3="-1.71475827" z3="0.02380193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90070034" y3="-0.96272268" z3="1.18496705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83839974" y3="-0.31512536" z3="1.52122536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35497178" y3="0.54476843" z3="1.22556505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43012035" y3="1.4549181" z3="-0.39475534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98743925" y3="-0.72258609" z3="1.3914715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32554688" y3="1.72528145" z3="2.67981148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87855096" y3="-0.94776509" z3="2.07958007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65199437" y3="-0.33081326" z3="3.33717762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20026171" y3="0.76771888" z3="-1.22688886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35239557" y3="2.23693196" z3="-0.38828298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4055803" y3="1.94915082" z3="-0.54925055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01707385" y3="-1.09426912" z3="2.42922782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96225193" y3="-0.26331832" z3="1.15395478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85648123" y3="-1.55881924" z3="0.68595099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38280037" y3="1.17779254" z3="3.63739713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61641699" y3="2.30340526" z3="2.67933137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16081598" y3="2.44708828" z3="2.64011681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79385001" y3="-0.78936375" z3="3.85427727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56995583" y3="-0.49880542" z3="3.9159607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4758164" y3="0.75034153" z3="3.2140773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83961793" y3="-0.70901984" z3="0.98877859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41852631" y3="-2.03731905" z3="0.84646194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76792902" y3="-2.68821679" z3="1.8873783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55546385" y3="-1.99805587" z3="3.07724251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02963935" y3="-0.7048219" z3="3.27618338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67999839" y3="-0.06728848" z3="2.22440187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52611145" y3="-2.53299258" z3="-0.1196509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37509252" y3="-3.69777938" z3="1.76112993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69364888" y3="-2.60182196" z3="4.09864344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.844557" y3="-0.19762756" z3="4.22367453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01957448" y3="0.96554839" z3="2.34308253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79131185" y3="0.45217052" z3="-4.29377654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7702906" y3="-0.51631571" z3="-4.4719258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42204475" y3="-1.70677626" z3="-5.09925124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13602284" y3="-1.93578676" z3="-5.57865983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83613262" y3="-0.96410987" z3="-5.37815991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03622515" y3="1.37444916" z3="-3.76067163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78849869" y3="-0.3718445" z3="-4.11000195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43356965" y3="-2.75641111" z3="-5.23992974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09450253" y3="-2.87514266" z3="-6.08138986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85781663" y3="-1.14824443" z3="-5.71443411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36440329" y3="-1.91167726" z3="5.04365398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31628844" y3="-3.74203335" z3="3.92505006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.20960375" y3="-3.65841343" z3="-6.0184224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43630911" y3="-2.67124741" z3="-4.55883621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06652523" y3="1.17661817" z3="-1.48294213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.1074062" y3="1.56196721" z3="-2.46420726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43395252" y3="1.51577212" z3="-1.67453921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84412232" y3="2.18642469" z3="-2.80081339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15892159" y3="1.22161994" z3="-0.90931407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89936935" y3="2.43646396" z3="-2.94004901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5682117" y3="2.23634259" z3="-3.62955033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89839803" y3="2.53925499" z3="-3.79319909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84852036" y3="2.50530541" z3="-4.4061206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23002135" y3="3.0506501" z3="-4.70097772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39646266" y3="3.14960918" z3="-3.33538788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28323603" y3="3.55789817" z3="-4.12772528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19757711" y3="4.16400102" z3="-2.7380475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94358117" y3="5.49570952" z3="-2.96400512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02391851" y3="3.87856757" z3="-2.08515988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57510626" y3="6.25417573" z3="-2.49176322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05469541" y3="4.94322468" z3="-4.35514411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86984383" y3="5.89489637" z3="-3.79479951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20522684" y3="5.23736548" z3="-4.97939572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68335213" y3="6.95726231" z3="-3.97417126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47510934" y3="-2.18572725" z3="-0.29933714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44713901" y3="-2.97793364" z3="-1.06692843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00825105" y3="-2.56596507" z3="0.58689065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08472842" y3="-1.36256323" z3="-0.71814619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16791972" y3="-1.42211555" z3="-1.14458943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30021402" y3="-0.38158602" z3="-1.4934775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09219368" y3="-1.55104201" z3="-0.93795147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40912237" y3="-2.07618859" z3="-1.99610853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3375,.0527,-.1915;7.3806,.1773,.4231;6.6423,.4496,-.3372;4.7255,1.2386,-2.2609;4.3862,.4345,-1.185;2.7304,.8413,-3.666;3.6312,1.7467,-3.1366;1.3813,2.5814,-4.6255;1.5634,1.2417,-4.3819;.5029,2.9139,-5.1874;2.9297,-.4885,-3.4445;3.0971,.0406,-1.0042;2.4006,-1.1016,-2.0061;.9289,-.9676,-1.837;3.0992,-2.4277,-1.8498;-.1486,-3.6205,.6773;-.0312,-5.2533,-4.7417;-.2573,-4.9977,-3.7029;-.85,-4.3112,-1.0813;.7692,-4.5877,-2.8533;-1.5721,-5.0911,-3.2415;-1.8694,-4.7427,-1.9263;.4847,-4.2593,-1.5263;1.8001,-4.502,-3.2026;-2.3705,-5.4083,-3.9148;-2.9043,-4.7862,-1.58;-1.0379,-3.8625,.2397;-2.1775,-3.6434,.884;-3.0669,-4.1029,.4508;-2.1719,-3.5071,2.351;-2.2293,-3.3154,5.1485;-3.3697,-3.7011,3.0545;-1.0025,-3.2244,3.0726;-1.0285,-3.129,4.4609;-3.3974,-3.6076,4.4432;-4.287,-3.9341,2.5065;-.0412,-3.1016,2.5682;-.0971,-2.9296,4.9989;-4.3371,-3.7696,4.9784;-2.2494,-3.2488,6.2398;1.4053,-3.8916,-.6246;2.1658,-3.3915,-1.0789;.5254,.2338,-4.7202;-3.0754,-1.7148,.0238;-2.9007,-.9627,1.185;-1.8384,-.3151,1.5212;-.355,.5448,1.2256;-.4301,1.4549,-.3948;.9874,-.7226,1.3915;-.3255,1.7253,2.6798;-3.8786,-.9478,2.0796;-3.652,-.3308,3.3372;-.2003,.7677,-1.2269;.3524,2.2369,-.3883;-1.4056,1.9492,-.5493;1.0171,-1.0943,2.4292;1.9623,-.2633,1.154;.8565,-1.5588,.686;-.3828,1.1778,3.6374;.6164,2.3034,2.6793;-1.1608,2.4471,2.6401;-2.7939,-.7894,3.8543;-4.57,-.4988,3.916;-3.4758,.7503,3.2141;4.8396,-.709,.9888;4.4185,-2.0373,.8465;3.7679,-2.6882,1.8874;3.5555,-1.9981,3.0772;4.0296,-.7048,3.2762;4.68,-.0673,2.2244;4.5261,-2.533,-.1197;3.3751,-3.6978,1.7611;2.6936,-2.6018,4.0986;3.8446,-.1976,4.2237;5.0196,.9655,2.3431;-.7913,.4522,-4.2938;-1.7703,-.5163,-4.4719;-1.422,-1.7068,-5.0993;-.136,-1.9358,-5.5787;.8361,-.9641,-5.3782;-1.0362,1.3744,-3.7607;-2.7885,-.3718,-4.11;-2.4336,-2.7564,-5.2399;.0945,-2.8751,-6.0814;1.8578,-1.1482,-5.7144;2.3644,-1.9117,5.0437;2.3163,-3.742,3.9251;-2.2096,-3.6584,-6.0184;-3.4363,-2.6712,-4.5588;7.0665,1.1766,-1.4829;6.1074,1.562,-2.4642;8.434,1.5158,-1.6745;8.8441,2.1864,-2.8008;9.1589,1.2216,-.9093;9.8994,2.4365,-2.94;6.5682,2.2363,-3.6296;7.8984,2.5393,-3.7932;5.8485,2.5053,-4.4061;8.23,3.0507,-4.701;3.3965,3.1496,-3.3354;2.2832,3.5579,-4.1277;4.1976,4.164,-2.738;3.9436,5.4957,-2.964;5.0239,3.8786,-2.0852;4.5751,6.2542,-2.4918;2.0547,4.9432,-4.3551;2.8698,5.8949,-3.7948;1.2052,5.2374,-4.9794;2.6834,6.9573,-3.9742;-4.4751,-2.1857,-.2993;-4.4471,-2.9779,-1.0669;-5.0083,-2.566,.5869;-5.0847,-1.3626,-.7181;-2.1679,-1.4221,-1.1446;-2.3002,-.3816,-1.4935;-1.0922,-1.551,-.938;-2.4091,-2.0762,-1.9961;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414973454</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001748988252 0.000240337714 0.018055838730 0.005343051554</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030737900 -0.000141541 -0.000015249 0.000048976 0.000166978 0.000332137 0.000349227 0.000437592 0.000602454 0.000834135 0.000890766 0.000983000 0.001209003 0.001282064 0.001411766 0.001488896 0.001553753 0.001739097 0.001789911 0.001916507 0.002116386 0.002287953 0.002409289 0.002501919 0.002689164 0.003058621 0.003067461 0.003213836 0.003563620 0.003867914 0.004449805 0.004693473 0.004766229 0.005118971 0.006015148 0.006062428 0.006311041 0.006668180 0.006893454 0.007609503 0.008065184 0.008156856 0.008413156 0.009424688 0.009724003 0.010073872 0.010128754 0.011158264 0.011935619 0.012210933 0.013028942 0.013122450 0.014269916 0.014843883 0.015392816 0.015710349 0.015978764 0.016689157 0.016768717 0.017507822 0.018251595 0.018808051 0.019374809 0.019623790 0.020206405 0.020721964 0.021238357 0.021413280 0.022262436 0.023123791 0.023845355 0.026477994 0.026892462 0.027902837 0.028221420 0.029581074 0.030470660 0.031623232 0.033274559 0.033724595 0.034155955 0.035777929 0.037174946 0.037413555 0.039504556 0.040021483 0.040235890 0.041092264 0.042593282 0.044717296 0.045656205 0.047146980 0.048038042 0.049284346 0.050510684 0.051084031 0.051307354 0.051689862 0.052492485 0.052789627 0.052958412 0.053244190 0.054833515 0.054985063 0.056119471 0.056360489 0.056587754 0.057043703 0.057238344 0.059214506 0.060642636 0.061068341 0.061847104 0.062418111 0.063420100 0.064537608 0.065321904 0.066009251 0.066618527 0.068411058 0.069195991 0.070285613 0.072790477 0.074459124 0.074805248 0.076529548 0.079138154 0.084537612 0.086950703 0.087185563 0.087656058 0.089736374 0.090681156 0.091499100 0.094275211 0.095031071 0.095853800 0.096498237 0.097868165 0.098850392 0.100229158 0.100827323 0.102368351 0.103202296 0.103416418 0.103885236 0.104515956 0.104951275 0.106366065 0.107069127 0.108243610 0.110040819 0.111190243 0.112468868 0.113569730 0.115097306 0.116285137 0.116854478 0.118768676 0.121347056 0.122499776 0.123756382 0.125316914 0.126247209 0.126353830 0.126776003 0.127666904 0.132156650 0.135108417 0.135880528 0.143137858 0.144040652 0.147095209 0.147659714 0.149768841 0.151906862 0.154674468 0.155020593 0.156677111 0.161388966 0.162002615 0.173797589 0.174458161 0.181855116 0.185220420 0.186490453 0.189675757 0.190447657 0.194455462 0.195740330 0.198948249 0.200373311 0.205233627 0.207169689 0.207440403 0.210287252 0.216719119 0.217156825 0.217969494 0.219966784 0.220890779 0.225411414 0.226754581 0.232400582 0.235196041 0.235719793 0.236103503 0.244748336 0.256134507 0.257350969 0.264007509 0.269979483 0.280788477 0.283604163 0.286367524 0.291982388 0.297042575 0.304495248 0.306018466 0.307324387 0.314530429 0.316830122 0.317447375 0.322260695 0.330177108 0.332933161 0.351846736 0.353018788 0.355124227 0.355963121 0.360090769 0.363090942 0.364601920 0.384209976 0.386061813 0.392251510 0.410577088 0.426072091 0.431268804 0.462504497 0.469242019 0.479136656 0.484591931 0.484635453 0.487551571 0.491493738 0.509688496 0.515585208 0.535406681 0.569337450 0.575382979 0.591565423 0.594252177 0.607365814 0.608447492 0.644977708 0.647872637 0.649773147 0.674447044 0.678447879 0.688095421 0.693429364 0.693871139 0.700296837 0.704841732 0.718491265 0.742274016 0.751445666 0.759464448 0.772078167 0.774631577 0.779722127 0.811027564 0.816470876 0.820185990 0.823133219 0.823740318 0.832314874 0.835042134 0.837893153 0.842675271 0.845960296 0.847687819 0.850233227 0.859792781 0.865952510 0.868969306 0.874702239 0.886241002 0.887935157 0.889789949 0.900817832 0.901113041 0.904186027 0.924102961 0.928248713 0.936599464 0.938117997 0.966387125 0.976653561 0.987397149 1.001766853 1.020369543 1.028813304 1.042602844 1.052387380 1.058395824 1.069024705 1.087003536 1.088992786 1.105236096 1.111330487 1.112794813 1.127678605 1.136416700 1.141199249 1.145198665 1.176706823 1.179192116 1.181853549 1.187423888 1.191647277 1.198497093 1.224764810 1.229015241 1.274785237 1.302895259 1.321408865 1.328443451 1.333288869 1.336651699 1.338190630 1.342229940 1.344061931 1.345146121 1.359849184 1.379689826 1.383421251 1.385864723 1.409180345 1.420987759 1.431513167 1.551513713 1.686465718 1.776487343</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">302</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33914415" y3="0.05485416" z3="-0.18952202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38445321" y3="0.1821649" z3="0.42295177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6448121" y3="0.45233314" z3="-0.33716772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7251071" y3="1.23668624" z3="-2.26039716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38669946" y3="0.4347556" z3="-1.18264417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72825859" y3="0.83862474" z3="-3.66234968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6298074" y3="1.74455579" z3="-3.13487857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37766807" y3="2.578992" z3="-4.62031327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56068832" y3="1.23845922" z3="-4.37746284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49871665" y3="2.91090891" z3="-5.18163837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92738662" y3="-0.49082791" z3="-3.43934539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09762308" y3="0.04202252" z3="-0.99998794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40143767" y3="-1.10249472" z3="-1.99916621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92976506" y3="-0.9706152" z3="-1.82822343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10261196" y3="-2.42710106" z3="-1.84189605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14876084" y3="-3.61672419" z3="0.67197674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01713745" y3="-5.25629489" z3="-4.74374325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24686634" y3="-4.99749734" z3="-3.70659421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84738008" y3="-4.30478274" z3="-1.08847008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77674296" y3="-4.589312" z3="-2.85375933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56336538" y3="-5.08540132" z3="-3.25040154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86444142" y3="-4.73344063" z3="-1.93695256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4887063" y3="-4.25802975" z3="-1.52824169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81086631" y3="-4.51171887" z3="-3.19937254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36226874" y3="-5.39806748" z3="-3.9266817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.90202173" y3="-4.76940044" z3="-1.5947804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03750835" y3="-3.85709633" z3="0.23248719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17754856" y3="-3.64099355" z3="0.87692133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06690489" y3="-4.09907102" z3="0.4414153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17296327" y3="-3.508942" z3="2.34423539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23170798" y3="-3.32906378" z3="5.14250007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3712411" y3="-3.70652026" z3="3.04608099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00399334" y3="-3.22819752" z3="3.06769185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03069245" y3="-3.13849162" z3="4.45641564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39976862" y3="-3.618717" z3="4.43510617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28734878" y3="-3.93894882" z3="2.49652903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04303948" y3="-3.10121715" z3="2.5646539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10038014" y3="-2.93918917" z3="4.99584506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33951202" y3="-3.78403644" z3="4.96901771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25237174" y3="-3.26690138" z3="6.23411957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40870602" y3="-3.8952784" z3="-0.62303676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17019244" y3="-3.393731" z3="-1.07424573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5227417" y3="0.23096818" z3="-4.71514986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07836503" y3="-1.70901701" z3="0.02358726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90109981" y3="-0.96036265" z3="1.18634898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83792479" y3="-0.31347908" z3="1.52176605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35470098" y3="0.54714998" z3="1.22826592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4265597" y3="1.45802148" z3="-0.3920056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98717815" y3="-0.72081664" z3="1.39594428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.32782465" y3="1.72815309" z3="2.68200842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87681047" y3="-0.94829723" z3="2.08329439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64708274" y3="-0.33725047" z3="3.34295515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20035324" y3="0.76977891" z3="-1.22444312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35885311" y3="2.23660473" z3="-0.38576665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40001564" y3="1.95660254" z3="-0.54587677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01528902" y3="-1.09159698" z3="2.43369121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96218363" y3="-0.2622176" z3="1.15890286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85612854" y3="-1.55709993" z3="0.69028624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.38692811" y3="1.18122703" z3="3.63979256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.61421383" y3="2.30624371" z3="2.6826835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.16301833" y3="2.44961879" z3="2.64042628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7874554" y3="-0.79792684" z3="3.8556154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56321812" y3="-0.50849483" z3="3.9233991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47190845" y3="0.74448828" z3="3.22445659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84156898" y3="-0.70401981" z3="0.99282892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42360486" y3="-2.03360359" z3="0.85421092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.77233976" y3="-2.68241997" z3="1.89600745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55599453" y3="-1.98869896" z3="3.08302576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02689563" y3="-0.69376933" z3="3.27844738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67791881" y3="-0.05838875" z3="2.22571939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53335405" y3="-2.53192752" z3="-0.11054281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38150585" y3="-3.69323745" z3="1.77220458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6927674" y3="-2.59087045" z3="4.10421227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8387764" y3="-0.18376564" z3="4.22393741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01442133" y3="0.97555141" z3="2.34099358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.794996" y3="0.45093045" z3="-4.2918389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77465956" y3="-0.51646665" z3="-4.47193236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42606772" y3="-1.70769566" z3="-5.09768554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13869285" y3="-1.93854882" z3="-5.57291934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83396071" y3="-0.96795559" z3="-5.37065859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04039312" y3="1.37403334" z3="-3.7604099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79400863" y3="-0.37060174" z3="-4.11333179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43838496" y3="-2.75597135" z3="-5.24125162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09236109" y3="-2.87856573" z3="-6.07421609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85628786" y3="-1.15364028" z3="-5.70445236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35966862" y3="-1.89843499" z3="5.04602481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31818492" y3="-3.73236624" z3="3.93344687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21424334" y3="-3.6563943" z3="-6.02164953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44162892" y3="-2.67124402" z3="-4.5612095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06789948" y3="1.1748245" z3="-1.48574466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10717671" y3="1.55818696" z3="-2.4665199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43559506" y3="1.51010714" z3="-1.68109386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84475562" y3="2.17634241" z3="-2.80995627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16171689" y3="1.21625023" z3="-0.91679327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9005604" y3="2.42437133" z3="-2.9518379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5667099" y3="2.22814901" z3="-3.63428607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89749404" y3="2.5288576" z3="-3.80106817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84571122" y3="2.49604742" z3="-4.41015678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22841723" y3="3.03883315" z3="-4.71034014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39519914" y3="3.14756317" z3="-3.33447488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28033327" y3="3.55567487" z3="-4.12456992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19871756" y3="4.16176373" z3="-2.74102472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94442945" y3="5.49372696" z3="-2.96732099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02678086" y3="3.87652947" z3="-2.09029494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57851363" y3="6.25152429" z3="-2.4991759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05192578" y3="4.94051965" z3="-4.3530486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86842051" y3="5.89283371" z3="-3.7951742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20076757" y3="5.23465843" z3="-4.97495481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68135572" y3="6.95538143" z3="-3.97466351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47823347" y3="-2.18011205" z3="-0.29755377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45101932" y3="-2.97123416" z3="-1.06578917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00960979" y3="-2.56146081" z3="0.58914718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08864622" y3="-1.35683191" z3="-0.71470691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17279894" y3="-1.41451036" z3="-1.14567113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30571555" y3="-0.37306912" z3="-1.49275495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09694894" y3="-1.5433258" z3="-0.94029236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41487351" y3="-2.06741381" z3="-1.99773689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0549,-.1895;7.3845,.1822,.423;6.6448,.4523,-.3372;4.7251,1.2367,-2.2604;4.3867,.4348,-1.1826;2.7283,.8386,-3.6623;3.6298,1.7446,-3.1349;1.3777,2.579,-4.6203;1.5607,1.2385,-4.3775;.4987,2.9109,-5.1816;2.9274,-.4908,-3.4393;3.0976,.042,-1;2.4014,-1.1025,-1.9992;.9298,-.9706,-1.8282;3.1026,-2.4271,-1.8419;-.1488,-3.6167,.672;-.0171,-5.2563,-4.7437;-.2469,-4.9975,-3.7066;-.8474,-4.3048,-1.0885;.7767,-4.5893,-2.8538;-1.5634,-5.0854,-3.2504;-1.8644,-4.7334,-1.937;.4887,-4.258,-1.5282;1.8109,-4.5117,-3.1994;-2.3623,-5.3981,-3.9267;-2.902,-4.7694,-1.5948;-1.0375,-3.8571,.2325;-2.1775,-3.641,.8769;-3.0669,-4.0991,.4414;-2.173,-3.5089,2.3442;-2.2317,-3.3291,5.1425;-3.3712,-3.7065,3.0461;-1.004,-3.2282,3.0677;-1.0307,-3.1385,4.4564;-3.3998,-3.6187,4.4351;-4.2873,-3.9389,2.4965;-.043,-3.1012,2.5647;-.1004,-2.9392,4.9958;-4.3395,-3.784,4.969;-2.2524,-3.2669,6.2341;1.4087,-3.8953,-.623;2.1702,-3.3937,-1.0742;.5227,.231,-4.7151;-3.0784,-1.709,.0236;-2.9011,-.9604,1.1863;-1.8379,-.3135,1.5218;-.3547,.5471,1.2283;-.4266,1.458,-.392;.9872,-.7208,1.3959;-.3278,1.7282,2.682;-3.8768,-.9483,2.0833;-3.6471,-.3373,3.343;-.2004,.7698,-1.2244;.3589,2.2366,-.3858;-1.4,1.9566,-.5459;1.0153,-1.0916,2.4337;1.9622,-.2622,1.1589;.8561,-1.5571,.6903;-.3869,1.1812,3.6398;.6142,2.3062,2.6827;-1.163,2.4496,2.6404;-2.7875,-.7979,3.8556;-4.5632,-.5085,3.9234;-3.4719,.7445,3.2245;4.8416,-.704,.9928;4.4236,-2.0336,.8542;3.7723,-2.6824,1.896;3.556,-1.9887,3.083;4.0269,-.6938,3.2784;4.6779,-.0584,2.2257;4.5334,-2.5319,-.1105;3.3815,-3.6932,1.7722;2.6928,-2.5909,4.1042;3.8388,-.1838,4.2239;5.0144,.9756,2.341;-.795,.4509,-4.2918;-1.7747,-.5165,-4.4719;-1.4261,-1.7077,-5.0977;-.1387,-1.9385,-5.5729;.834,-.968,-5.3707;-1.0404,1.374,-3.7604;-2.794,-.3706,-4.1133;-2.4384,-2.756,-5.2413;.0924,-2.8786,-6.0742;1.8563,-1.1536,-5.7045;2.3597,-1.8984,5.046;2.3182,-3.7324,3.9334;-2.2142,-3.6564,-6.0216;-3.4416,-2.6712,-4.5612;7.0679,1.1748,-1.4857;6.1072,1.5582,-2.4665;8.4356,1.5101,-1.6811;8.8448,2.1763,-2.81;9.1617,1.2163,-.9168;9.9006,2.4244,-2.9518;6.5667,2.2281,-3.6343;7.8975,2.5289,-3.8011;5.8457,2.496,-4.4102;8.2284,3.0388,-4.7103;3.3952,3.1476,-3.3345;2.2803,3.5557,-4.1246;4.1987,4.1618,-2.741;3.9444,5.4937,-2.9673;5.0268,3.8765,-2.0903;4.5785,6.2515,-2.4992;2.0519,4.9405,-4.353;2.8684,5.8928,-3.7952;1.2008,5.2347,-4.975;2.6814,6.9554,-3.9747;-4.4782,-2.1801,-.2976;-4.451,-2.9712,-1.0658;-5.0096,-2.5615,.5891;-5.0886,-1.3568,-.7147;-2.1728,-1.4145,-1.1457;-2.3057,-.3731,-1.4928;-1.0969,-1.5433,-.9403;-2.4149,-2.0674,-1.9977;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418244000</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000906748620 0.000182381792 0.019678305369 0.005343601744</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030737771 -0.000290853 0.000000459 0.000107988 0.000193465 0.000333334 0.000345371 0.000437536 0.000603535 0.000834050 0.000890604 0.000982848 0.001208929 0.001288171 0.001411767 0.001494764 0.001554231 0.001741717 0.001790731 0.001916797 0.002118157 0.002289972 0.002410214 0.002505751 0.002689856 0.003062440 0.003069212 0.003213217 0.003564576 0.003869305 0.004449961 0.004694097 0.004766445 0.005121037 0.006015697 0.006066710 0.006311032 0.006668200 0.006896169 0.007610594 0.008065479 0.008163669 0.008413215 0.009425203 0.009723951 0.010073709 0.010129736 0.011158737 0.011937823 0.012211794 0.013030418 0.013124055 0.014281493 0.014844577 0.015395413 0.015720867 0.015982590 0.016688997 0.016769638 0.017508602 0.018251748 0.018808819 0.019374821 0.019624411 0.020207196 0.020723945 0.021238862 0.021413680 0.022262560 0.023124201 0.023845476 0.026478762 0.026892637 0.027908913 0.028223853 0.029581691 0.030475989 0.031623623 0.033275125 0.033725076 0.034157243 0.035778269 0.037175474 0.037416120 0.039506188 0.040021364 0.040237560 0.041095209 0.042593984 0.044718137 0.045656534 0.047150698 0.048038105 0.049284385 0.050510888 0.051085072 0.051308543 0.051695945 0.052492847 0.052791541 0.052958452 0.053246898 0.054835113 0.054985861 0.056119819 0.056360612 0.056590062 0.057044945 0.057238452 0.059215424 0.060646812 0.061068730 0.061847298 0.062418151 0.063420009 0.064537565 0.065323086 0.066014990 0.066618412 0.068413093 0.069201677 0.070286867 0.072791827 0.074460153 0.074805225 0.076529753 0.079142645 0.084541602 0.086950860 0.087186861 0.087661362 0.089736441 0.090681417 0.091504963 0.094276326 0.095035002 0.095857388 0.096499453 0.097868312 0.098852045 0.100229977 0.100829925 0.102380825 0.103208595 0.103469595 0.103909113 0.104529688 0.104962304 0.106367875 0.107069876 0.108243739 0.110045846 0.111192276 0.112470454 0.113569771 0.115097323 0.116286887 0.116856665 0.118769171 0.121348679 0.122502012 0.123761354 0.125316121 0.126247490 0.126354905 0.126776110 0.127678485 0.132156706 0.135108404 0.135880479 0.143137852 0.144048098 0.147095252 0.147661564 0.149769595 0.151907829 0.154675249 0.155020837 0.156680360 0.161389261 0.162002668 0.173800167 0.174463430 0.181866501 0.185228351 0.186500140 0.189675793 0.190447739 0.194455860 0.195740317 0.198949705 0.200375303 0.205233600 0.207170560 0.207444110 0.210287295 0.216738434 0.217156951 0.217970150 0.219970402 0.220890995 0.225411392 0.226755409 0.232400742 0.235200135 0.235720303 0.236105018 0.244748340 0.256134688 0.257351280 0.264007665 0.269979779 0.280788507 0.283618230 0.286370333 0.291982385 0.297043184 0.304496016 0.306020101 0.307324795 0.314530525 0.316830751 0.317448502 0.322262076 0.330177146 0.332933438 0.351846686 0.353019402 0.355136034 0.355967361 0.360092243 0.363091122 0.364602798 0.384212565 0.386062997 0.392253099 0.410577655 0.426075864 0.431275630 0.462505832 0.469252542 0.479136677 0.484592223 0.484637178 0.487553510 0.491493737 0.509688784 0.515585574 0.535408433 0.569344312 0.575383057 0.591565483 0.594252929 0.607370036 0.608451874 0.644986376 0.647886202 0.649775391 0.674450540 0.678450285 0.688121110 0.693444004 0.693898730 0.700303719 0.704842762 0.718491303 0.742274169 0.751445769 0.759464980 0.772078309 0.774645575 0.779726854 0.811028307 0.816471436 0.820187362 0.823134004 0.823742685 0.832321381 0.835045583 0.837905895 0.842682846 0.845960590 0.847691141 0.850233357 0.859792932 0.865952731 0.868969020 0.874703525 0.886242795 0.887993181 0.889791430 0.900817888 0.901113408 0.904186205 0.924106903 0.928248718 0.936600504 0.938129545 0.966387513 0.976700561 0.987397732 1.001767757 1.020372588 1.028820704 1.042603447 1.052426568 1.058426498 1.069041645 1.087004286 1.088997347 1.105239985 1.111403265 1.112796500 1.127678510 1.136425174 1.141203049 1.145211531 1.176721222 1.179192170 1.181853613 1.187447176 1.191648562 1.198497337 1.224765694 1.229017801 1.274796068 1.302924745 1.321408870 1.328444990 1.333293096 1.336666867 1.338197773 1.342253202 1.344089011 1.345152942 1.359868879 1.379690201 1.383449703 1.385882278 1.409186933 1.420990953 1.431513164 1.551514480 1.686469210 1.776488511</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">303</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33986878" y3="0.05383468" z3="-0.1892932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38564901" y3="0.17026057" z3="0.41797735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64597643" y3="0.44389628" z3="-0.34047177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72626743" y3="1.23676871" z3="-2.25963388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38736973" y3="0.43607836" z3="-1.1812406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72746751" y3="0.84107972" z3="-3.65950727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63074091" y3="1.74578631" z3="-3.13317858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37786169" y3="2.5823598" z3="-4.61601038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55931781" y3="1.24231159" z3="-4.37301348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49852248" y3="2.91571093" z3="-5.17588481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92597407" y3="-0.48870636" z3="-3.43734629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09770281" y3="0.04456277" z3="-0.99805568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40190656" y3="-1.10081454" z3="-1.99669548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93010904" y3="-0.97085243" z3="-1.82462842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10480477" y3="-2.42460679" z3="-1.84025723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14554081" y3="-3.61166004" z3="0.66995895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00950101" y3="-5.2558199" z3="-4.744128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23980494" y3="-4.9966285" z3="-3.70715946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8424385" y3="-4.30278586" z3="-1.08972099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7842339" y3="-4.59050551" z3="-2.8529657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55744373" y3="-5.08202616" z3="-3.2524201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85984904" y3="-4.72946656" z3="-1.93951674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49468302" y3="-4.25840575" z3="-1.52795167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81764753" y3="-4.51192794" z3="-3.19709612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35441394" y3="-5.39597032" z3="-3.92917779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89700882" y3="-4.76562837" z3="-1.59896884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03366966" y3="-3.85427998" z3="0.23073169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17425412" y3="-3.64281767" z3="0.8754084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06152263" y3="-4.10394368" z3="0.43965775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16987426" y3="-3.51224591" z3="2.34290898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22942451" y3="-3.3355515" z3="5.14131465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36683165" y3="-3.71635913" z3="3.04491844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00243657" y3="-3.22640371" z3="3.06627951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0294515" y3="-3.1384748" z3="4.45509968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39560338" y3="-3.63035574" z3="4.43404057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28251328" y3="-3.95170382" z3="2.49530398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04189172" y3="-3.09461756" z3="2.56292714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0996893" y3="-2.93607359" z3="4.99468391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33462472" y3="-3.80038265" z3="4.96807487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25018428" y3="-3.2750602" z3="6.23301738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41285905" y3="-3.89495484" z3="-0.62198224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17373469" y3="-3.39227973" z3="-1.07265424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52077575" y3="0.23521382" z3="-4.71132298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08119861" y3="-1.71291055" z3="0.02369198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90280706" y3="-0.96468842" z3="1.18657631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84010743" y3="-0.31615024" z3="1.51983949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36163042" y3="0.55183192" z3="1.22432969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43624316" y3="1.45615603" z3="-0.39933687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98544222" y3="-0.70948602" z3="1.39889436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34250194" y3="1.73928131" z3="2.67314517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87640743" y3="-0.9551613" z3="2.08597476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64438406" y3="-0.34516047" z3="3.34588648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2051489" y3="0.76658894" z3="-1.22894425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34536467" y3="2.23883705" z3="-0.39475758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41198512" y3="1.94884575" z3="-0.55620641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01215335" y3="-1.07820856" z3="2.43787252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95972792" y3="-0.24846176" z3="1.16326542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85858676" y3="-1.54792646" z3="0.69513234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40143872" y3="1.19684512" z3="3.63336574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59710402" y3="2.32121895" z3="2.67330471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18034605" y3="2.45764595" z3="2.62630008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78317811" y3="-0.80561328" z3="3.85603464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55927515" y3="-0.51769227" z3="3.9284915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47006998" y3="0.73706691" z3="3.22836076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84132597" y3="-0.70292968" z3="0.99405193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42128128" y3="-2.03203062" z3="0.85702041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76899235" y3="-2.67854184" z3="1.89960772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55377799" y3="-1.98312311" z3="3.08583312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0268788" y3="-0.68871615" z3="3.27985093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67887675" y3="-0.05562283" z3="2.22633584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53104333" y3="-2.53181166" z3="-0.10671756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37715781" y3="-3.6890195" z3="1.77740746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6906655" y3="-2.58333813" z3="4.10822578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8396797" y3="-0.17721816" z3="4.22458073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01739152" y3="0.97794126" z3="2.34065182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79704261" y3="0.45596679" z3="-4.28941225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77692989" y3="-0.51117216" z3="-4.46997417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42831867" y3="-1.70267023" z3="-5.09535478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14088791" y3="-1.93432458" z3="-5.56962676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8320393" y3="-0.96412994" z3="-5.36661223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04258545" y3="1.37940847" z3="-3.75846788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79628957" y3="-0.36466265" z3="-4.11195583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44080705" y3="-2.75074859" z3="-5.23980185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08979999" y3="-2.8745947" z3="-6.07050923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85462735" y3="-1.15043971" z3="-5.69884608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35767454" y3="-1.88912996" z3="5.04898925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31644456" y3="-3.72530291" z3="3.93971634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21648389" y3="-3.65118444" z3="-6.01994313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44448266" y3="-2.66600721" z3="-4.56005778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06957118" y3="1.16585217" z3="-1.48970027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10869411" y3="1.55413627" z3="-2.46810211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43816211" y3="1.49655378" z3="-1.68791604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84752615" y3="2.16178475" z3="-2.81770003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16478846" y3="1.20007443" z3="-0.92514068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90375092" y3="2.40469302" z3="-2.96230168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56831975" y3="2.22381453" z3="-3.636578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89956819" y3="2.51807452" z3="-3.80672293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84684902" y3="2.4950586" z3="-4.41072212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23037952" y3="3.02545883" z3="-4.7170664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.397864" y3="3.14872844" z3="-3.33268325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28228829" y3="3.5580288" z3="-4.12114125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20352228" y3="4.16209205" z3="-2.73988893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95098739" y3="5.49404442" z3="-2.96605469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03227101" y3="3.87566338" z3="-2.09051122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58597483" y3="6.25198395" z3="-2.49741002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05510431" y3="4.94344483" z3="-4.34861886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87410024" y3="5.89433588" z3="-3.79223494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20351344" y3="5.23857725" z3="-4.96946014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6886796" y3="6.95684349" z3="-3.97165433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48116555" y3="-2.1864045" z3="-0.29454288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45496431" y3="-2.97756842" z3="-1.06332863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00974803" y3="-2.56883574" z3="0.59333123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09437626" y3="-1.36403937" z3="-0.70982736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17852273" y3="-1.41615012" z3="-1.14730223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31489974" y3="-0.37530555" z3="-1.49410025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10180662" y3="-1.54278503" z3="-0.94392559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42075472" y3="-2.06949852" z3="-1.99896958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3399,.0538,-.1893;7.3856,.1703,.418;6.646,.4439,-.3405;4.7263,1.2368,-2.2596;4.3874,.4361,-1.1812;2.7275,.8411,-3.6595;3.6307,1.7458,-3.1332;1.3779,2.5824,-4.616;1.5593,1.2423,-4.373;.4985,2.9157,-5.1759;2.926,-.4887,-3.4373;3.0977,.0446,-.9981;2.4019,-1.1008,-1.9967;.9301,-.9709,-1.8246;3.1048,-2.4246,-1.8403;-.1455,-3.6117,.67;-.0095,-5.2558,-4.7441;-.2398,-4.9966,-3.7072;-.8424,-4.3028,-1.0897;.7842,-4.5905,-2.853;-1.5574,-5.082,-3.2524;-1.8598,-4.7295,-1.9395;.4947,-4.2584,-1.528;1.8176,-4.5119,-3.1971;-2.3544,-5.396,-3.9292;-2.897,-4.7656,-1.599;-1.0337,-3.8543,.2307;-2.1743,-3.6428,.8754;-3.0615,-4.1039,.4397;-2.1699,-3.5122,2.3429;-2.2294,-3.3356,5.1413;-3.3668,-3.7164,3.0449;-1.0024,-3.2264,3.0663;-1.0295,-3.1385,4.4551;-3.3956,-3.6304,4.434;-4.2825,-3.9517,2.4953;-.0419,-3.0946,2.5629;-.0997,-2.9361,4.9947;-4.3346,-3.8004,4.9681;-2.2502,-3.2751,6.233;1.4129,-3.895,-.622;2.1737,-3.3923,-1.0727;.5208,.2352,-4.7113;-3.0812,-1.7129,.0237;-2.9028,-.9647,1.1866;-1.8401,-.3162,1.5198;-.3616,.5518,1.2243;-.4362,1.4562,-.3993;.9854,-.7095,1.3989;-.3425,1.7393,2.6731;-3.8764,-.9552,2.086;-3.6444,-.3452,3.3459;-.2051,.7666,-1.2289;.3454,2.2388,-.3948;-1.412,1.9488,-.5562;1.0122,-1.0782,2.4379;1.9597,-.2485,1.1633;.8586,-1.5479,.6951;-.4014,1.1968,3.6334;.5971,2.3212,2.6733;-1.1803,2.4576,2.6263;-2.7832,-.8056,3.856;-4.5593,-.5177,3.9285;-3.4701,.7371,3.2284;4.8413,-.7029,.9941;4.4213,-2.032,.857;3.769,-2.6785,1.8996;3.5538,-1.9831,3.0858;4.0269,-.6887,3.2799;4.6789,-.0556,2.2263;4.531,-2.5318,-.1067;3.3772,-3.689,1.7774;2.6907,-2.5833,4.1082;3.8397,-.1772,4.2246;5.0174,.9779,2.3407;-.797,.456,-4.2894;-1.7769,-.5112,-4.47;-1.4283,-1.7027,-5.0954;-.1409,-1.9343,-5.5696;.832,-.9641,-5.3666;-1.0426,1.3794,-3.7585;-2.7963,-.3647,-4.112;-2.4408,-2.7507,-5.2398;.0898,-2.8746,-6.0705;1.8546,-1.1504,-5.6988;2.3577,-1.8891,5.049;2.3164,-3.7253,3.9397;-2.2165,-3.6512,-6.0199;-3.4445,-2.666,-4.5601;7.0696,1.1659,-1.4897;6.1087,1.5541,-2.4681;8.4382,1.4966,-1.6879;8.8475,2.1618,-2.8177;9.1648,1.2001,-.9251;9.9038,2.4047,-2.9623;6.5683,2.2238,-3.6366;7.8996,2.5181,-3.8067;5.8468,2.4951,-4.4107;8.2304,3.0255,-4.7171;3.3979,3.1487,-3.3327;2.2823,3.558,-4.1211;4.2035,4.1621,-2.7399;3.951,5.494,-2.9661;5.0323,3.8757,-2.0905;4.586,6.252,-2.4974;2.0551,4.9434,-4.3486;2.8741,5.8943,-3.7922;1.2035,5.2386,-4.9695;2.6887,6.9568,-3.9717;-4.4812,-2.1864,-.2945;-4.455,-2.9776,-1.0633;-5.0097,-2.5688,.5933;-5.0944,-1.364,-.7098;-2.1785,-1.4162,-1.1473;-2.3149,-.3753,-1.4941;-1.1018,-1.5428,-.9439;-2.4208,-2.0695,-1.999;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421895489</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001174033872 0.000218820625 0.017768726456 0.005344980126</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030738327 -0.000233373 0.000053499 0.000103425 0.000173419 0.000300859 0.000341499 0.000421359 0.000604431 0.000832520 0.000890854 0.000982847 0.001209245 0.001294850 0.001412596 0.001496850 0.001555939 0.001743367 0.001792147 0.001916811 0.002121416 0.002291446 0.002410710 0.002511008 0.002690107 0.003064318 0.003075158 0.003208410 0.003567291 0.003869243 0.004449812 0.004692959 0.004766858 0.005121292 0.006013421 0.006075889 0.006311233 0.006666996 0.006895666 0.007616201 0.008067648 0.008177214 0.008417301 0.009427708 0.009721036 0.010065975 0.010131001 0.011159040 0.011942821 0.012215056 0.013030970 0.013129962 0.014303029 0.014848280 0.015397482 0.015739378 0.015990203 0.016690066 0.016770881 0.017511550 0.018251803 0.018808373 0.019371194 0.019625514 0.020210422 0.020732054 0.021239555 0.021414289 0.022252704 0.023122694 0.023834366 0.026479546 0.026894115 0.027919305 0.028225110 0.029583015 0.030484594 0.031624105 0.033274544 0.033725413 0.034160535 0.035780427 0.037174800 0.037420028 0.039503776 0.040018670 0.040232516 0.041096898 0.042594661 0.044720025 0.045657217 0.047155267 0.048038542 0.049284323 0.050511984 0.051088270 0.051309227 0.051708517 0.052493271 0.052793177 0.052958830 0.053252863 0.054837520 0.054988235 0.056121737 0.056360847 0.056591352 0.057047980 0.057238550 0.059216583 0.060651376 0.061070574 0.061848921 0.062418678 0.063420172 0.064537585 0.065324750 0.066031670 0.066618093 0.068417696 0.069215865 0.070287942 0.072794665 0.074461094 0.074805810 0.076529868 0.079145733 0.084543901 0.086951200 0.087190221 0.087673575 0.089734728 0.090683121 0.091514751 0.094277895 0.095042563 0.095864408 0.096502313 0.097868502 0.098853739 0.100230484 0.100837276 0.102396771 0.103215226 0.103535995 0.103970023 0.104550129 0.104985763 0.106370279 0.107071002 0.108244115 0.110052535 0.111195088 0.112472068 0.113570129 0.115095975 0.116290154 0.116860654 0.118769288 0.121357402 0.122506598 0.123767597 0.125331865 0.126248361 0.126358751 0.126776940 0.127715810 0.132157692 0.135110009 0.135881568 0.143140321 0.144053842 0.147095333 0.147661987 0.149774718 0.151900797 0.154675124 0.155018521 0.156684578 0.161392351 0.162002258 0.173808866 0.174467082 0.181893831 0.185245368 0.186514507 0.189675310 0.190448859 0.194458854 0.195741309 0.198951543 0.200379242 0.205235315 0.207172154 0.207451903 0.210287256 0.216761535 0.217160016 0.217971920 0.219982746 0.220892094 0.225411333 0.226756467 0.232401838 0.235207357 0.235721468 0.236107788 0.244748406 0.256134871 0.257351333 0.264007518 0.269979957 0.280789171 0.283652813 0.286376851 0.291981904 0.297045452 0.304497703 0.306024526 0.307324957 0.314530712 0.316831599 0.317451520 0.322265016 0.330178768 0.332933494 0.351847157 0.353022544 0.355158747 0.355974854 0.360094881 0.363091278 0.364607027 0.384216972 0.386062674 0.392254891 0.410578610 0.426083292 0.431282481 0.462506891 0.469269546 0.479143065 0.484595192 0.484637749 0.487557137 0.491493824 0.509690714 0.515585029 0.535409091 0.569355076 0.575384530 0.591566800 0.594253493 0.607384584 0.608452618 0.644997057 0.647903606 0.649782768 0.674452350 0.678455235 0.688149138 0.693458480 0.693946338 0.700317931 0.704846188 0.718490986 0.742274677 0.751445777 0.759465226 0.772081570 0.774668975 0.779732800 0.811029177 0.816479798 0.820189797 0.823134067 0.823746296 0.832328716 0.835048816 0.837935225 0.842692401 0.845960667 0.847693459 0.850237016 0.859796013 0.865953152 0.868979002 0.874704183 0.886253557 0.888119179 0.889800837 0.900821529 0.901114784 0.904187783 0.924112902 0.928248977 0.936602163 0.938148217 0.966387747 0.976804690 0.987399333 1.001771109 1.020378447 1.028825602 1.042604222 1.052515027 1.058505271 1.069077059 1.087005511 1.088999378 1.105243137 1.111509475 1.112800658 1.127689918 1.136440156 1.141210706 1.145240420 1.176743844 1.179192957 1.181853635 1.187483317 1.191649584 1.198500264 1.224766013 1.229022100 1.274801941 1.302980677 1.321409179 1.328446917 1.333305405 1.336684560 1.338203116 1.342314810 1.344138303 1.345164074 1.359883372 1.379692664 1.383471125 1.385917014 1.409231336 1.420992434 1.431523101 1.551516155 1.686477601 1.776505387</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">304</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33779845" y3="0.05250239" z3="-0.18912179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38396718" y3="0.17261014" z3="0.42222281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64501663" y3="0.44510896" z3="-0.33772624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72739578" y3="1.2350399" z3="-2.26076156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.386575" y3="0.4348525" z3="-1.18243021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72865592" y3="0.84283634" z3="-3.66144112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6334517" y3="1.74608058" z3="-3.13511544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38212459" y3="2.58688387" z3="-4.61862802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56162392" y3="1.24584162" z3="-4.37566877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50367627" y3="2.92125235" z3="-5.17930893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92425832" y3="-0.48705196" z3="-3.43902416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09641998" y3="0.04571648" z3="-0.99999214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40069031" y3="-1.09961163" z3="-1.99843881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92897686" y3="-0.97088986" z3="-1.82536573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10479081" y3="-2.42294041" z3="-1.84290705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14241255" y3="-3.61120389" z3="0.66985137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0076378" y3="-5.25287442" z3="-4.74473559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2381516" y3="-4.99392824" z3="-3.70785523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84042203" y3="-4.30093081" z3="-1.09029171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78500908" y3="-4.58716055" z3="-2.8539169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55510549" y3="-5.08026692" z3="-3.25301961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85702553" y3="-4.72818909" z3="-1.93987943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49598385" y3="-4.25560496" z3="-1.52870483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81947616" y3="-4.51086061" z3="-3.19828389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35418" y3="-5.39129751" z3="-3.93017973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8949743" y3="-4.76230161" z3="-1.59905997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03110781" y3="-3.8536199" z3="0.23067855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17143705" y3="-3.64527845" z3="0.87691431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05862154" y3="-4.10805152" z3="0.44177975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1662336" y3="-3.5152334" z3="2.34432962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22310712" y3="-3.34379751" z3="5.1430975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36203636" y3="-3.724595" z3="3.04708468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99881085" y3="-3.2259562" z3="3.0669703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02470161" y3="-3.14058863" z3="4.45601103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38963102" y3="-3.6409839" z3="4.43639734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27679711" y3="-3.96348274" z3="2.49804546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03965345" y3="-3.08873181" z3="2.56262709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09579068" y3="-2.93483016" z3="4.99522044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32708904" y3="-3.81618382" z3="4.97101693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24278212" y3="-3.28533117" z3="6.2349448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41579845" y3="-3.89402484" z3="-0.62264959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17626775" y3="-3.39093212" z3="-1.07382064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52142054" y3="0.24039799" z3="-4.71236809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08558124" y3="-1.71750522" z3="0.02644599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90592586" y3="-0.96947525" z3="1.18908628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84358195" y3="-0.31846003" z3="1.51939994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36943793" y3="0.5558439" z3="1.22031391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44753499" y3="1.45426068" z3="-0.40664451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98269079" y3="-0.69996335" z3="1.39988124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35671758" y3="1.75017083" z3="2.66360089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87688645" y3="-0.96318561" z3="2.09131214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64265824" y3="-0.35504527" z3="3.35166038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21248218" y3="0.763046" z3="-1.23421787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32935583" y3="2.24155772" z3="-0.40361051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42608449" y3="1.94123629" z3="-0.56568451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01077589" y3="-1.06430481" z3="2.4400465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95568318" y3="-0.23717492" z3="1.16205296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85843889" y3="-1.54174188" z3="0.69948979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41410816" y3="1.21228433" z3="3.62654794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58012036" y3="2.33672378" z3="2.6615536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19811477" y3="2.4638402" z3="2.61214415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77854513" y3="-0.81401476" z3="3.85835451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55492405" y3="-0.53162286" z3="3.93654795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47241757" y3="0.72760151" z3="3.23551586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83812245" y3="-0.70324447" z3="0.99434618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41478123" y3="-2.03121702" z3="0.85699209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76288698" y3="-2.67717087" z3="1.90010879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55103959" y3="-1.982167" z3="3.08705172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02676906" y3="-0.68884221" z3="3.28101393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67866273" y3="-0.05636702" z3="2.22707173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52126998" y3="-2.530167" z3="-0.10805367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36866278" y3="-3.68680367" z3="1.7775625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68959009" y3="-2.58215153" z3="4.11090627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84241687" y3="-0.17784567" z3="4.22660513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01961628" y3="0.97624881" z3="2.34161128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79562766" y3="0.4622105" z3="-4.2881065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77643828" y3="-0.50442331" z3="-4.46686684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42971474" y3="-1.69645157" z3="-5.09166639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14312388" y3="-1.92891784" z3="-5.56819575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83061078" y3="-0.95924716" z3="-5.36785208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03956303" y3="1.38602995" z3="-3.75742591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79534625" y3="-0.35721957" z3="-4.1075342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44302275" y3="-2.74391534" z3="-5.23376471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08649748" y3="-2.86960922" z3="-6.06902908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85234232" y3="-1.14631938" z3="-5.70238258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35647739" y3="-1.88716671" z3="5.05090809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31686908" y3="-3.7248338" z3="3.94437666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22050091" y3="-3.64494419" z3="-6.01403015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44542735" y3="-2.65782158" z3="-4.55274553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07041411" y3="1.16426476" z3="-1.48751281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11063361" y3="1.55099613" z3="-2.46788917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43945547" y3="1.49229157" z3="-1.68471886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85077662" y3="2.15517014" z3="-2.81483671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16480669" y3="1.19526312" z3="-0.92096098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90766442" y3="2.39736443" z3="-2.95829519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57221023" y3="2.21780452" z3="-3.63669867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90433416" y3="2.5118377" z3="-3.80519563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85176588" y3="2.48865051" z3="-4.41204814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23687719" y3="3.01946192" z3="-4.71536491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40312985" y3="3.14972443" z3="-3.33550397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28861519" y3="3.56089278" z3="-4.12463098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21099074" y3="4.16178287" z3="-2.74418056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96118257" y3="5.49442055" z3="-2.9717545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03901661" y3="3.87425519" z3="-2.0943332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59896153" y3="6.25025619" z3="-2.50581983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06472903" y3="4.94640309" z3="-4.35418951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88554671" y3="5.89634579" z3="-3.79874586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21388539" y3="5.24289886" z3="-4.97545983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70204578" y3="6.95941681" z3="-3.97929431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48453689" y3="-2.19578496" z3="-0.28784276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45733569" y3="-2.98735039" z3="-1.05577866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00964102" y3="-2.57924855" z3="0.60187099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10106579" y3="-1.37581807" z3="-0.70245602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1861203" y3="-1.41859596" z3="-1.14650569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32390277" y3="-0.37687926" z3="-1.49113261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.109093" y3="-1.54442317" z3="-0.94535876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43026649" y3="-2.0708384" z3="-1.99859649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3378,.0525,-.1891;7.384,.1726,.4222;6.645,.4451,-.3377;4.7274,1.235,-2.2608;4.3866,.4349,-1.1824;2.7287,.8428,-3.6614;3.6335,1.7461,-3.1351;1.3821,2.5869,-4.6186;1.5616,1.2458,-4.3757;.5037,2.9213,-5.1793;2.9243,-.4871,-3.439;3.0964,.0457,-1;2.4007,-1.0996,-1.9984;.929,-.9709,-1.8254;3.1048,-2.4229,-1.8429;-.1424,-3.6112,.6699;-.0076,-5.2529,-4.7447;-.2382,-4.9939,-3.7079;-.8404,-4.3009,-1.0903;.785,-4.5872,-2.8539;-1.5551,-5.0803,-3.253;-1.857,-4.7282,-1.9399;.496,-4.2556,-1.5287;1.8195,-4.5109,-3.1983;-2.3542,-5.3913,-3.9302;-2.895,-4.7623,-1.5991;-1.0311,-3.8536,.2307;-2.1714,-3.6453,.8769;-3.0586,-4.1081,.4418;-2.1662,-3.5152,2.3443;-2.2231,-3.3438,5.1431;-3.362,-3.7246,3.0471;-.9988,-3.226,3.067;-1.0247,-3.1406,4.456;-3.3896,-3.641,4.4364;-4.2768,-3.9635,2.498;-.0397,-3.0887,2.5626;-.0958,-2.9348,4.9952;-4.3271,-3.8162,4.971;-2.2428,-3.2853,6.2349;1.4158,-3.894,-.6226;2.1763,-3.3909,-1.0738;.5214,.2404,-4.7124;-3.0856,-1.7175,.0264;-2.9059,-.9695,1.1891;-1.8436,-.3185,1.5194;-.3694,.5558,1.2203;-.4475,1.4543,-.4066;.9827,-.7,1.3999;-.3567,1.7502,2.6636;-3.8769,-.9632,2.0913;-3.6427,-.355,3.3517;-.2125,.763,-1.2342;.3294,2.2416,-.4036;-1.4261,1.9412,-.5657;1.0108,-1.0643,2.44;1.9557,-.2372,1.1621;.8584,-1.5417,.6995;-.4141,1.2123,3.6265;.5801,2.3367,2.6616;-1.1981,2.4638,2.6121;-2.7785,-.814,3.8584;-4.5549,-.5316,3.9365;-3.4724,.7276,3.2355;4.8381,-.7032,.9943;4.4148,-2.0312,.857;3.7629,-2.6772,1.9001;3.551,-1.9822,3.0871;4.0268,-.6888,3.281;4.6787,-.0564,2.2271;4.5213,-2.5302,-.1081;3.3687,-3.6868,1.7776;2.6896,-2.5822,4.1109;3.8424,-.1778,4.2266;5.0196,.9762,2.3416;-.7956,.4622,-4.2881;-1.7764,-.5044,-4.4669;-1.4297,-1.6965,-5.0917;-.1431,-1.9289,-5.5682;.8306,-.9592,-5.3679;-1.0396,1.386,-3.7574;-2.7953,-.3572,-4.1075;-2.443,-2.7439,-5.2338;.0865,-2.8696,-6.069;1.8523,-1.1463,-5.7024;2.3565,-1.8872,5.0509;2.3169,-3.7248,3.9444;-2.2205,-3.6449,-6.014;-3.4454,-2.6578,-4.5527;7.0704,1.1643,-1.4875;6.1106,1.551,-2.4679;8.4395,1.4923,-1.6847;8.8508,2.1552,-2.8148;9.1648,1.1953,-.921;9.9077,2.3974,-2.9583;6.5722,2.2178,-3.6367;7.9043,2.5118,-3.8052;5.8518,2.4887,-4.412;8.2369,3.0195,-4.7154;3.4031,3.1497,-3.3355;2.2886,3.5609,-4.1246;4.211,4.1618,-2.7442;3.9612,5.4944,-2.9718;5.039,3.8743,-2.0943;4.599,6.2503,-2.5058;2.0647,4.9464,-4.3542;2.8855,5.8963,-3.7987;1.2139,5.2429,-4.9755;2.702,6.9594,-3.9793;-4.4845,-2.1958,-.2878;-4.4573,-2.9874,-1.0558;-5.0096,-2.5792,.6019;-5.1011,-1.3758,-.7025;-2.1861,-1.4186,-1.1465;-2.3239,-.3769,-1.4911;-1.1091,-1.5444,-.9454;-2.4303,-2.0708,-1.9986;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424014837</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001197681126 0.000221827417 0.018567457591 0.005345414375</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030738557 -0.000154151 0.000033199 0.000130709 0.000178940 0.000315051 0.000319772 0.000425451 0.000603460 0.000832398 0.000889154 0.000981369 0.001203577 0.001295033 0.001412100 0.001494775 0.001554778 0.001733939 0.001787680 0.001915086 0.002109473 0.002289497 0.002409185 0.002512346 0.002687179 0.003055563 0.003065572 0.003204855 0.003560690 0.003862450 0.004448602 0.004692193 0.004767026 0.005127956 0.006011838 0.006087808 0.006311040 0.006665704 0.006903910 0.007610029 0.008069768 0.008188473 0.008409337 0.009427486 0.009718219 0.010067674 0.010130011 0.011156756 0.011946715 0.012217184 0.013037498 0.013126166 0.014312460 0.014850980 0.015404533 0.015756398 0.015999346 0.016691850 0.016774978 0.017513084 0.018251222 0.018809606 0.019368184 0.019627126 0.020208842 0.020731507 0.021239474 0.021415283 0.022246821 0.023120681 0.023823049 0.026481480 0.026893946 0.027924157 0.028226865 0.029584342 0.030490941 0.031623241 0.033274238 0.033725457 0.034163629 0.035778988 0.037174986 0.037423497 0.039495250 0.040002931 0.040228373 0.041100645 0.042594400 0.044722960 0.045658927 0.047157516 0.048038428 0.049284409 0.050511644 0.051087582 0.051309217 0.051716906 0.052493515 0.052794990 0.052959642 0.053256511 0.054842077 0.054988946 0.056125182 0.056361625 0.056591740 0.057049765 0.057238575 0.059216519 0.060650921 0.061071835 0.061849197 0.062419388 0.063421583 0.064537543 0.065325585 0.066043344 0.066617938 0.068422331 0.069224029 0.070288991 0.072796096 0.074464515 0.074805648 0.076530013 0.079147640 0.084544417 0.086953752 0.087189498 0.087674880 0.089739122 0.090685359 0.091521525 0.094282310 0.095053975 0.095871827 0.096502225 0.097868775 0.098853004 0.100229997 0.100838964 0.102412636 0.103217607 0.103587742 0.104031304 0.104573325 0.105023882 0.106373065 0.107073126 0.108244210 0.110060989 0.111199718 0.112478453 0.113575405 0.115095815 0.116291940 0.116861362 0.118770124 0.121360338 0.122514918 0.123772570 0.125338978 0.126249858 0.126366357 0.126778440 0.127733964 0.132159294 0.135111579 0.135882824 0.143141145 0.144055750 0.147095875 0.147663451 0.149779865 0.151899414 0.154675223 0.155012232 0.156687238 0.161387326 0.162003786 0.173809363 0.174469717 0.181909083 0.185265537 0.186529582 0.189675425 0.190449659 0.194460424 0.195745745 0.198956834 0.200380038 0.205234483 0.207177055 0.207455337 0.210288409 0.216783896 0.217170089 0.217973211 0.219983924 0.220890721 0.225413327 0.226756961 0.232404175 0.235207998 0.235724730 0.236107768 0.244748964 0.256135318 0.257351462 0.264008583 0.269980684 0.280788634 0.283679934 0.286380260 0.291981995 0.297047753 0.304506219 0.306025366 0.307325696 0.314532099 0.316833045 0.317452709 0.322266663 0.330178172 0.332935060 0.351845959 0.353025764 0.355194851 0.355978085 0.360093365 0.363092010 0.364606580 0.384216571 0.386064993 0.392257425 0.410577693 0.426088461 0.431285935 0.462507149 0.469283611 0.479144760 0.484601728 0.484638041 0.487561016 0.491493947 0.509692942 0.515584688 0.535409921 0.569365063 0.575385913 0.591568402 0.594258962 0.607394819 0.608454788 0.645013120 0.647919590 0.649783692 0.674452900 0.678457714 0.688166280 0.693468708 0.693990326 0.700329118 0.704849663 0.718494743 0.742274810 0.751445790 0.759465765 0.772083693 0.774696025 0.779737306 0.811028763 0.816486097 0.820192146 0.823136163 0.823748327 0.832330643 0.835054285 0.837968109 0.842695857 0.845961135 0.847693464 0.850237614 0.859796513 0.865953746 0.868982543 0.874709531 0.886269945 0.888222169 0.889808423 0.900822576 0.901114802 0.904192468 0.924118482 0.928249180 0.936606173 0.938155331 0.966388376 0.976906268 0.987400382 1.001776472 1.020379602 1.028828435 1.042604386 1.052563508 1.058563416 1.069108423 1.087006304 1.089000430 1.105244711 1.111595844 1.112805728 1.127702004 1.136458902 1.141220806 1.145279431 1.176761425 1.179196115 1.181854849 1.187509331 1.191654792 1.198505396 1.224766414 1.229030959 1.274805458 1.303029665 1.321411534 1.328452804 1.333320345 1.336703147 1.338205225 1.342345713 1.344184950 1.345181305 1.359913119 1.379693488 1.383484063 1.385973969 1.409246136 1.420993068 1.431517541 1.551516216 1.686486877 1.776508637</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">305</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3359716" y3="0.05388124" z3="-0.18949771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38045699" y3="0.16723681" z3="0.42287839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6430949" y3="0.4416389" z3="-0.33762015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72937471" y3="1.23657596" z3="-2.26208087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38636586" y3="0.43740322" z3="-1.1838139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73075973" y3="0.84681743" z3="-3.66430037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63692703" y3="1.74863873" z3="-3.13782555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38898533" y3="2.59217611" z3="-4.62475665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56461256" y3="1.25180274" z3="-4.3790063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5113803" y3="2.92821641" z3="-5.18573771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92448349" y3="-0.48358184" z3="-3.44214608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09540861" y3="0.04881668" z3="-1.00293518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39981844" y3="-1.09611976" z3="-2.00203537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92802715" y3="-0.967253" z3="-1.82943025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10344157" y3="-2.41976959" z3="-1.84681894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14061355" y3="-3.61120662" z3="0.67231738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01121378" y3="-5.2476635" z3="-4.74484438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23988895" y3="-4.99136398" z3="-3.70680851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83819242" y3="-4.30451176" z3="-1.08656815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78490151" y3="-4.58417331" z3="-2.85415283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55619595" y3="-5.08142931" z3="-3.24922969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85633321" y3="-4.73254062" z3="-1.93486446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.497632" y3="-4.25554107" z3="-1.52773251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81739637" y3="-4.50223177" z3="-3.20063675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35407818" y3="-5.39567402" z3="-3.92491701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8926437" y3="-4.77189554" z3="-1.59193946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02808028" y3="-3.85802492" z3="0.2347916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16858846" y3="-3.65114871" z3="0.88111343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05442617" y3="-4.11664252" z3="0.44703701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16298679" y3="-3.51980018" z3="2.348499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21990029" y3="-3.34530246" z3="5.14701832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35750928" y3="-3.73273352" z3="3.05199553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99671948" y3="-3.22536296" z3="3.07035179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02240672" y3="-3.13889454" z3="4.45930994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38505643" y3="-3.64765231" z3="4.44117113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27211397" y3="-3.97462773" z3="2.50347339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03823662" y3="-3.08521081" z3="2.56558455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09358661" y3="-2.93044007" z3="4.9981772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32215527" y3="-3.82468038" z3="4.97636241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23934612" y3="-3.28595138" z3="6.23879848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41697759" y3="-3.89079412" z3="-0.62341206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17591777" y3="-3.3869671" z3="-1.07609899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52207908" y3="0.24765135" z3="-4.71392193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08623671" y3="-1.72646566" z3="0.02849342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90815826" y3="-0.9769767" z3="1.19050642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84752206" y3="-0.32296104" z3="1.51985972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37731587" y3="0.55667367" z3="1.21719647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4599989" y3="1.45143333" z3="-0.41165432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97945547" y3="-0.69365773" z3="1.39782186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36809286" y3="1.75433359" z3="2.65760251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8787884" y3="-0.97223173" z3="2.0930342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64569805" y3="-0.36134759" z3="3.35218721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21810775" y3="0.7604677" z3="-1.23721064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31078838" y3="2.24494124" z3="-0.40918419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4420089" y3="1.9302866" z3="-0.57321899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00932229" y3="-1.05717904" z3="2.43851164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95078507" y3="-0.22815611" z3="1.15890958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85707408" y3="-1.53671006" z3="0.69852476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42140221" y3="1.21883174" z3="3.62203331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56570289" y3="2.34560631" z3="2.65251949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21299073" y3="2.46402879" z3="2.60555558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7809527" y3="-0.81799027" z3="3.85957825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55796618" y3="-0.53800901" z3="3.93760549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47641324" y3="0.72166566" z3="3.23431652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83463874" y3="-0.70247252" z3="0.99285799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40880599" y3="-2.02952819" z3="0.85356767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75660697" y3="-2.67620833" z3="1.89601943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54732374" y3="-1.98289956" z3="3.08451348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02555257" y3="-0.69061173" z3="3.28043783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67737855" y3="-0.0573859" z3="2.22689068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51454322" y3="-2.52727383" z3="-0.11180155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36076563" y3="-3.68504304" z3="1.77211471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6871832" y3="-2.58364941" z3="4.10892262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84312415" y3="-0.18094854" z3="4.2270784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02024087" y3="0.97445865" z3="2.34283996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79351858" y3="0.47129238" z3="-4.28653018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77563794" y3="-0.49474821" z3="-4.46060285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43166186" y3="-1.68791449" z3="-5.08555507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14690882" y3="-1.92204726" z3="-5.56584106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82833915" y3="-0.95293267" z3="-5.36910807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03518913" y3="1.39595637" z3="-3.75587263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79311788" y3="-0.34614812" z3="-4.09813767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44616152" y3="-2.73510179" z3="-5.22293892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08008539" y3="-2.8635314" z3="-6.0660439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84902243" y3="-1.14122687" z3="-5.7060309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35550152" y3="-1.88917189" z3="5.05026351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31458865" y3="-3.72638724" z3="3.94218206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22709209" y3="-3.63726079" z3="-6.00259112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44638169" y3="-2.64777535" z3="-4.53840106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07086457" y3="1.16164411" z3="-1.48639806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11314333" y3="1.55035593" z3="-2.46776222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44060845" y3="1.48975189" z3="-1.68121953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85419535" y3="2.15235577" z3="-2.81085889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16464198" y3="1.19327253" z3="-0.9159287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9112567" y3="2.39343459" z3="-2.95277268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57721717" y3="2.21695107" z3="-3.63613356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90945286" y3="2.50836246" z3="-3.80311759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8582665" y3="2.48811864" z3="-4.41269476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24366758" y3="3.01352548" z3="-4.71340373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40995146" y3="3.15225801" z3="-3.34005863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29750207" y3="3.56482827" z3="-4.13127331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21881382" y3="4.16335078" z3="-2.74794503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97286077" y3="5.49591849" z3="-2.97782058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04475397" y3="3.87478127" z3="-2.09600066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61021538" y3="6.25209017" z3="-2.50953179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07738744" y3="4.95064374" z3="-4.36289263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89964658" y3="5.89925473" z3="-3.80726729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2284214" y3="5.24828388" z3="-4.98611037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71969157" y3="6.96215523" z3="-3.9899563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48441646" y3="-2.20784427" z3="-0.28544427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4559143" y3="-2.9995126" z3="-1.05356346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00834349" y3="-2.59252062" z3="0.60420067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10329068" y3="-1.38933249" z3="-0.69979134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18787659" y3="-1.4255029" z3="-1.14481105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32767049" y3="-0.38427132" z3="-1.48902883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1103738" y3="-1.54990942" z3="-0.9444463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43125684" y3="-2.07746711" z3="-1.9969778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.336,.0539,-.1895;7.3805,.1672,.4229;6.6431,.4416,-.3376;4.7294,1.2366,-2.2621;4.3864,.4374,-1.1838;2.7308,.8468,-3.6643;3.6369,1.7486,-3.1378;1.389,2.5922,-4.6248;1.5646,1.2518,-4.379;.5114,2.9282,-5.1857;2.9245,-.4836,-3.4421;3.0954,.0488,-1.0029;2.3998,-1.0961,-2.002;.928,-.9673,-1.8294;3.1034,-2.4198,-1.8468;-.1406,-3.6112,.6723;-.0112,-5.2477,-4.7448;-.2399,-4.9914,-3.7068;-.8382,-4.3045,-1.0866;.7849,-4.5842,-2.8542;-1.5562,-5.0814,-3.2492;-1.8563,-4.7325,-1.9349;.4976,-4.2555,-1.5277;1.8174,-4.5022,-3.2006;-2.3541,-5.3957,-3.9249;-2.8926,-4.7719,-1.5919;-1.0281,-3.858,.2348;-2.1686,-3.6511,.8811;-3.0544,-4.1166,.447;-2.163,-3.5198,2.3485;-2.2199,-3.3453,5.147;-3.3575,-3.7327,3.052;-.9967,-3.2254,3.0704;-1.0224,-3.1389,4.4593;-3.3851,-3.6477,4.4412;-4.2721,-3.9746,2.5035;-.0382,-3.0852,2.5656;-.0936,-2.9304,4.9982;-4.3222,-3.8247,4.9764;-2.2393,-3.286,6.2388;1.417,-3.8908,-.6234;2.1759,-3.387,-1.0761;.5221,.2477,-4.7139;-3.0862,-1.7265,.0285;-2.9082,-.977,1.1905;-1.8475,-.323,1.5199;-.3773,.5567,1.2172;-.46,1.4514,-.4117;.9795,-.6937,1.3978;-.3681,1.7543,2.6576;-3.8788,-.9722,2.093;-3.6457,-.3613,3.3522;-.2181,.7605,-1.2372;.3108,2.2449,-.4092;-1.442,1.9303,-.5732;1.0093,-1.0572,2.4385;1.9508,-.2282,1.1589;.8571,-1.5367,.6985;-.4214,1.2188,3.622;.5657,2.3456,2.6525;-1.213,2.464,2.6056;-2.781,-.818,3.8596;-4.558,-.538,3.9376;-3.4764,.7217,3.2343;4.8346,-.7025,.9929;4.4088,-2.0295,.8536;3.7566,-2.6762,1.896;3.5473,-1.9829,3.0845;4.0256,-.6906,3.2804;4.6774,-.0574,2.2269;4.5145,-2.5273,-.1118;3.3608,-3.685,1.7721;2.6872,-2.5836,4.1089;3.8431,-.1809,4.2271;5.0202,.9745,2.3428;-.7935,.4713,-4.2865;-1.7756,-.4947,-4.4606;-1.4317,-1.6879,-5.0856;-.1469,-1.922,-5.5658;.8283,-.9529,-5.3691;-1.0352,1.396,-3.7559;-2.7931,-.3461,-4.0981;-2.4462,-2.7351,-5.2229;.0801,-2.8635,-6.066;1.849,-1.1412,-5.706;2.3555,-1.8892,5.0503;2.3146,-3.7264,3.9422;-2.2271,-3.6373,-6.0026;-3.4464,-2.6478,-4.5384;7.0709,1.1616,-1.4864;6.1131,1.5504,-2.4678;8.4406,1.4898,-1.6812;8.8542,2.1524,-2.8109;9.1646,1.1933,-.9159;9.9113,2.3934,-2.9528;6.5772,2.217,-3.6361;7.9095,2.5084,-3.8031;5.8583,2.4881,-4.4127;8.2437,3.0135,-4.7134;3.41,3.1523,-3.3401;2.2975,3.5648,-4.1313;4.2188,4.1634,-2.7479;3.9729,5.4959,-2.9778;5.0448,3.8748,-2.096;4.6102,6.2521,-2.5095;2.0774,4.9506,-4.3629;2.8996,5.8993,-3.8073;1.2284,5.2483,-4.9861;2.7197,6.9622,-3.99;-4.4844,-2.2078,-.2854;-4.4559,-2.9995,-1.0536;-5.0083,-2.5925,.6042;-5.1033,-1.3893,-.6998;-2.1879,-1.4255,-1.1448;-2.3277,-.3843,-1.489;-1.1104,-1.5499,-.9444;-2.4313,-2.0775,-1.997;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423836527</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001088237031 0.000206704438 0.014598432519 0.005329970407</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030740116 -0.000599334 -0.000046498 0.000092047 0.000179172 0.000231608 0.000294335 0.000422386 0.000598057 0.000828026 0.000890542 0.000979828 0.001193659 0.001296100 0.001410568 0.001500690 0.001556504 0.001734062 0.001777480 0.001914332 0.002110202 0.002287640 0.002403931 0.002515654 0.002677849 0.003026481 0.003064533 0.003204175 0.003561849 0.003846064 0.004448748 0.004688243 0.004766718 0.005107360 0.006010502 0.006092340 0.006310710 0.006666861 0.006902451 0.007603864 0.008067774 0.008200003 0.008414946 0.009429222 0.009716914 0.010068250 0.010128964 0.011154196 0.011947254 0.012217140 0.013044756 0.013135801 0.014331433 0.014858545 0.015410997 0.015785356 0.016012394 0.016690811 0.016778494 0.017518739 0.018254511 0.018813175 0.019365359 0.019626492 0.020206291 0.020738897 0.021242725 0.021417078 0.022227270 0.023117456 0.023795859 0.026482404 0.026893140 0.027936400 0.028233550 0.029587676 0.030498363 0.031623702 0.033274425 0.033726509 0.034167681 0.035776986 0.037176794 0.037424840 0.039493646 0.039997793 0.040224013 0.041102112 0.042594165 0.044727024 0.045669871 0.047159560 0.048038622 0.049284301 0.050512039 0.051087356 0.051309167 0.051738663 0.052493702 0.052797898 0.052960076 0.053257757 0.054847012 0.054990030 0.056135626 0.056362718 0.056591702 0.057054636 0.057238929 0.059215911 0.060653753 0.061073286 0.061849593 0.062419853 0.063427015 0.064538559 0.065325733 0.066066925 0.066618026 0.068427810 0.069244926 0.070288619 0.072797175 0.074477474 0.074805529 0.076530556 0.079156211 0.084550444 0.086955294 0.087193159 0.087686245 0.089742412 0.090690149 0.091532383 0.094287215 0.095065719 0.095882353 0.096504025 0.097869018 0.098855088 0.100231335 0.100840785 0.102421001 0.103220711 0.103621276 0.104108550 0.104585177 0.105050307 0.106376193 0.107077981 0.108245590 0.110067658 0.111202632 0.112482735 0.113578981 0.115094461 0.116293702 0.116865522 0.118770625 0.121363339 0.122525222 0.123781460 0.125345908 0.126250917 0.126377620 0.126783422 0.127753068 0.132162374 0.135112997 0.135882739 0.143149864 0.144058084 0.147096161 0.147663930 0.149784815 0.151896946 0.154676225 0.155012105 0.156695022 0.161374348 0.162007486 0.173820079 0.174472135 0.181939404 0.185303277 0.186541014 0.189678340 0.190447999 0.194466134 0.195755555 0.198961600 0.200381740 0.205234264 0.207181846 0.207463202 0.210289347 0.216795398 0.217207741 0.217974353 0.219993309 0.220891500 0.225414485 0.226758944 0.232410021 0.235209626 0.235727331 0.236108101 0.244749770 0.256135875 0.257353660 0.264009841 0.269981518 0.280788994 0.283714278 0.286384835 0.291982465 0.297048508 0.304510230 0.306028697 0.307325785 0.314533968 0.316833601 0.317454646 0.322267561 0.330177555 0.332935888 0.351842626 0.353029977 0.355218780 0.355984590 0.360093955 0.363092920 0.364609325 0.384221696 0.386067590 0.392256527 0.410574840 0.426096124 0.431290392 0.462507576 0.469307876 0.479149446 0.484608680 0.484639740 0.487573549 0.491494319 0.509697832 0.515586470 0.535413403 0.569372253 0.575391129 0.591569713 0.594261132 0.607406275 0.608452116 0.645021273 0.647931580 0.649793129 0.674453642 0.678464325 0.688178280 0.693474055 0.694022107 0.700343831 0.704854095 0.718497379 0.742275972 0.751445830 0.759465465 0.772097428 0.774717150 0.779740570 0.811029816 0.816509010 0.820193035 0.823139218 0.823747908 0.832332454 0.835058560 0.837995314 0.842697870 0.845962469 0.847701083 0.850237117 0.859797952 0.865954384 0.869003548 0.874714161 0.886294907 0.888306723 0.889822053 0.900824961 0.901115523 0.904197072 0.924127250 0.928249603 0.936608502 0.938161716 0.966388985 0.977001435 0.987403047 1.001783394 1.020382195 1.028833146 1.042606507 1.052609015 1.058618928 1.069133655 1.087007505 1.089003394 1.105246063 1.111669386 1.112813211 1.127744800 1.136472271 1.141225646 1.145306108 1.176773047 1.179198146 1.181855201 1.187530853 1.191656439 1.198515400 1.224767068 1.229035788 1.274825678 1.303050723 1.321414775 1.328457314 1.333334614 1.336706844 1.338199825 1.342387937 1.344249177 1.345196326 1.359918929 1.379693681 1.383492810 1.386001815 1.409278429 1.421000633 1.431523257 1.551516920 1.686511213 1.776537141</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">306</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.32968489" y3="0.05407781" z3="-0.19078158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3741447" y3="0.16935282" z3="0.42746324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63836414" y3="0.44440671" z3="-0.33462791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72894266" y3="1.23933345" z3="-2.26380278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38261421" y3="0.43943913" z3="-1.18675688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73358354" y3="0.85137085" z3="-3.67048235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63914071" y3="1.75270543" z3="-3.14204499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39393271" y3="2.59782331" z3="-4.63295612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56901196" y3="1.25673198" z3="-4.38752014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51743424" y3="2.93382941" z3="-5.19573205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92557247" y3="-0.47892338" z3="-3.44778674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09103556" y3="0.05328242" z3="-1.00847549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39735015" y3="-1.09161292" z3="-2.00903784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92522707" y3="-0.96309192" z3="-1.83989808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10122628" y3="-2.41496984" z3="-1.85183848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13831128" y3="-3.61364381" z3="0.67943318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.013352" y3="-5.24111163" z3="-4.74099819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24119114" y3="-4.98700483" z3="-3.70232886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83764118" y3="-4.30418099" z3="-1.08072696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78271509" y3="-4.57636339" z3="-2.851367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55579154" y3="-5.08286456" z3="-3.24249937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85461446" y3="-4.73638698" z3="-1.92719772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49664638" y3="-4.24957517" z3="-1.52425107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81528187" y3="-4.49236552" z3="-3.19969376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35593108" y3="-5.39611361" z3="-3.91761943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89090977" y3="-4.77824841" z3="-1.58215337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02707917" y3="-3.85892797" z3="0.241226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16753192" y3="-3.6531131" z3="0.88810343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05341006" y3="-4.11915296" z3="0.45395039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16249079" y3="-3.52168883" z3="2.3553695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22012821" y3="-3.34787605" z3="5.15391292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3578257" y3="-3.73340337" z3="3.05828404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99584204" y3="-3.2290685" z3="3.07775746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02207986" y3="-3.14266762" z3="4.46670875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38584941" y3="-3.64846932" z3="4.4474681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27181032" y3="-3.97533318" z3="2.50949788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03699242" y3="-3.09057373" z3="2.57319135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09370705" y3="-2.93466607" z3="5.00581258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32294778" y3="-3.82545305" z3="4.98220864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24007421" y3="-3.28846395" z3="6.2456746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41759141" y3="-3.88328066" z3="-0.62134242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17588823" y3="-3.38014873" z3="-1.07623122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5262321" y3="0.2529597" z3="-4.72151928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08879316" y3="-1.73016196" z3="0.03452529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91071608" y3="-0.97823454" z3="1.19501742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85195387" y3="-0.3191382" z3="1.5211983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37865935" y3="0.55324957" z3="1.21076888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46636539" y3="1.44866861" z3="-0.41735866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97394226" y3="-0.702546" z3="1.38602565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35682678" y3="1.75133026" z3="2.65082326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87954654" y3="-0.97519661" z3="2.09952659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64496657" y3="-0.36370306" z3="3.35831928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22784663" y3="0.75813655" z3="-1.24451827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30465141" y3="2.24165974" z3="-0.41685033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44869866" y3="1.92837354" z3="-0.57499009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00549136" y3="-1.06632445" z3="2.42645046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9460703" y3="-0.23927472" z3="1.14530294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84856596" y3="-1.5450583" z3="0.68681851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40793481" y3="1.21663128" z3="3.61580716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58010404" y3="2.33772316" z3="2.64060744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1983923" y3="2.46500572" z3="2.60264602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77819865" y3="-0.81888785" z3="3.86405281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55544067" y3="-0.54228128" z3="3.94540684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47860826" y3="0.71917574" z3="3.23961579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.826283" y3="-0.70241032" z3="0.99054801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40212209" y3="-2.02983433" z3="0.85076188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75123798" y3="-2.67785393" z3="1.89321051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54126591" y3="-1.98539217" z3="3.08204718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01639389" y3="-0.69218848" z3="3.2777303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66726359" y3="-0.05764601" z3="2.22444817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50864573" y3="-2.52690743" z3="-0.11492976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3571191" y3="-3.68723975" z3="1.76905303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68356613" y3="-2.58846985" z3="4.10716452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83331114" y3="-0.18333803" z3="4.2247839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00887979" y3="0.97460388" z3="2.34106956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78851875" y3="0.47518807" z3="-4.2903282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76989956" y3="-0.49227797" z3="-4.4620658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42628789" y3="-1.68514154" z3="-5.08681498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14250203" y3="-1.9174537" z3="-5.57099903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83190036" y3="-0.94701747" z3="-5.37797979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02957011" y3="1.39944666" z3="-3.75935082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78675387" y3="-0.345126" z3="-4.0967783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43996887" y3="-2.73346679" z3="-5.22058267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08472592" y3="-2.85869818" z3="-6.07208132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85180641" y3="-1.13395079" z3="-5.71831864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35263396" y3="-1.89599676" z3="5.04944885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31121194" y3="-3.73115979" z3="3.93909136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22003078" y3="-3.63818827" z3="-5.99753342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44038575" y3="-2.64413398" z3="-4.53699228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06916894" y3="1.16296757" z3="-1.48260493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11362712" y3="1.55204142" z3="-2.4661721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43947735" y3="1.48750707" z3="-1.67493122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85635111" y3="2.15011328" z3="-2.80330796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16125905" y3="1.18833811" z3="-0.90868829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9142301" y3="2.38998794" z3="-2.94293381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58094496" y3="2.21809967" z3="-3.63320302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91439405" y3="2.50965852" z3="-3.79678932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86402536" y3="2.49127128" z3="-4.41092584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25140171" y3="3.01738349" z3="-4.70554485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41309919" y3="3.15675523" z3="-3.34475737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30233116" y3="3.56994348" z3="-4.13818673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22168011" y3="4.16739039" z3="-2.75194078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97660413" y3="5.50041535" z3="-2.98239739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04648247" y3="3.87846085" z3="-2.09862437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61496684" y3="6.25494728" z3="-2.51539791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0836151" y3="4.95571193" z3="-4.37094824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90538709" y3="5.90406371" z3="-3.81422897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23603651" y3="5.25364644" z3="-4.99596927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72579686" y3="6.96739112" z3="-3.99725377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48634826" y3="-2.21532153" z3="-0.27621647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45697833" y3="-3.00918066" z3="-1.04177337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00839617" y3="-2.59815763" z3="0.61554247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10705983" y3="-1.39926798" z3="-0.69244558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.19327923" y3="-1.42897885" z3="-1.14117551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33482215" y3="-0.38769192" z3="-1.48530392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1152949" y3="-1.55222842" z3="-0.94334149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4384729" y3="-2.08166389" z3="-1.99270876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3297,.0541,-.1908;7.3741,.1694,.4275;6.6384,.4444,-.3346;4.7289,1.2393,-2.2638;4.3826,.4394,-1.1868;2.7336,.8514,-3.6705;3.6391,1.7527,-3.142;1.3939,2.5978,-4.633;1.569,1.2567,-4.3875;.5174,2.9338,-5.1957;2.9256,-.4789,-3.4478;3.091,.0533,-1.0085;2.3974,-1.0916,-2.009;.9252,-.9631,-1.8399;3.1012,-2.415,-1.8518;-.1383,-3.6136,.6794;-.0134,-5.2411,-4.741;-.2412,-4.987,-3.7023;-.8376,-4.3042,-1.0807;.7827,-4.5764,-2.8514;-1.5558,-5.0829,-3.2425;-1.8546,-4.7364,-1.9272;.4966,-4.2496,-1.5243;1.8153,-4.4924,-3.1997;-2.3559,-5.3961,-3.9176;-2.8909,-4.7782,-1.5822;-1.0271,-3.8589,.2412;-2.1675,-3.6531,.8881;-3.0534,-4.1192,.454;-2.1625,-3.5217,2.3554;-2.2201,-3.3479,5.1539;-3.3578,-3.7334,3.0583;-.9958,-3.2291,3.0778;-1.0221,-3.1427,4.4667;-3.3858,-3.6485,4.4475;-4.2718,-3.9753,2.5095;-.037,-3.0906,2.5732;-.0937,-2.9347,5.0058;-4.3229,-3.8255,4.9822;-2.2401,-3.2885,6.2457;1.4176,-3.8833,-.6213;2.1759,-3.3801,-1.0762;.5262,.253,-4.7215;-3.0888,-1.7302,.0345;-2.9107,-.9782,1.195;-1.852,-.3191,1.5212;-.3787,.5532,1.2108;-.4664,1.4487,-.4174;.9739,-.7025,1.386;-.3568,1.7513,2.6508;-3.8795,-.9752,2.0995;-3.645,-.3637,3.3583;-.2278,.7581,-1.2445;.3047,2.2417,-.4169;-1.4487,1.9284,-.575;1.0055,-1.0663,2.4265;1.9461,-.2393,1.1453;.8486,-1.5451,.6868;-.4079,1.2166,3.6158;.5801,2.3377,2.6406;-1.1984,2.465,2.6026;-2.7782,-.8189,3.8641;-4.5554,-.5423,3.9454;-3.4786,.7192,3.2396;4.8263,-.7024,.9905;4.4021,-2.0298,.8508;3.7512,-2.6779,1.8932;3.5413,-1.9854,3.082;4.0164,-.6922,3.2777;4.6673,-.0576,2.2244;4.5086,-2.5269,-.1149;3.3571,-3.6872,1.7691;2.6836,-2.5885,4.1072;3.8333,-.1833,4.2248;5.0089,.9746,2.3411;-.7885,.4752,-4.2903;-1.7699,-.4923,-4.4621;-1.4263,-1.6851,-5.0868;-.1425,-1.9175,-5.571;.8319,-.947,-5.378;-1.0296,1.3994,-3.7594;-2.7868,-.3451,-4.0968;-2.44,-2.7335,-5.2206;.0847,-2.8587,-6.0721;1.8518,-1.134,-5.7183;2.3526,-1.896,5.0494;2.3112,-3.7312,3.9391;-2.22,-3.6382,-5.9975;-3.4404,-2.6441,-4.537;7.0692,1.163,-1.4826;6.1136,1.552,-2.4662;8.4395,1.4875,-1.6749;8.8564,2.1501,-2.8033;9.1613,1.1883,-.9087;9.9142,2.39,-2.9429;6.5809,2.2181,-3.6332;7.9144,2.5097,-3.7968;5.864,2.4913,-4.4109;8.2514,3.0174,-4.7055;3.4131,3.1568,-3.3448;2.3023,3.5699,-4.1382;4.2217,4.1674,-2.7519;3.9766,5.5004,-2.9824;5.0465,3.8785,-2.0986;4.615,6.2549,-2.5154;2.0836,4.9557,-4.3709;2.9054,5.9041,-3.8142;1.236,5.2536,-4.996;2.7258,6.9674,-3.9973;-4.4863,-2.2153,-.2762;-4.457,-3.0092,-1.0418;-5.0084,-2.5982,.6155;-5.1071,-1.3993,-.6924;-2.1933,-1.429,-1.1412;-2.3348,-.3877,-1.4853;-1.1153,-1.5522,-.9433;-2.4385,-2.0817,-1.9927;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650414079213</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001467129204 0.000294090229 0.025468135139 0.005359050207</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030741369 -0.000217139 0.000014383 0.000126505 0.000191133 0.000253381 0.000293364 0.000422573 0.000598061 0.000829031 0.000892176 0.000981147 0.001193820 0.001296221 0.001410573 0.001504121 0.001558341 0.001734053 0.001777584 0.001914311 0.002112603 0.002287718 0.002404001 0.002514571 0.002677786 0.003026413 0.003064550 0.003204066 0.003563229 0.003847343 0.004448743 0.004688292 0.004766640 0.005107358 0.006010760 0.006097481 0.006310977 0.006666971 0.006905776 0.007604293 0.008073739 0.008206388 0.008417484 0.009430041 0.009717023 0.010067951 0.010128932 0.011157028 0.011947552 0.012219475 0.013050200 0.013143719 0.014342894 0.014864353 0.015413990 0.015803697 0.016027807 0.016691887 0.016778798 0.017522036 0.018255470 0.018813255 0.019366879 0.019628784 0.020206704 0.020743523 0.021245306 0.021417827 0.022227262 0.023118353 0.023796199 0.026483568 0.026893007 0.027948732 0.028236666 0.029589707 0.030505568 0.031625147 0.033274438 0.033726578 0.034168351 0.035778114 0.037177815 0.037424768 0.039494013 0.040000375 0.040223939 0.041102581 0.042594272 0.044727213 0.045673534 0.047160298 0.048038620 0.049284357 0.050513373 0.051087205 0.051309149 0.051751174 0.052493756 0.052799786 0.052960661 0.053258640 0.054849551 0.054990113 0.056148856 0.056364375 0.056591703 0.057054691 0.057239060 0.059215947 0.060654824 0.061073577 0.061851240 0.062419847 0.063427059 0.064538656 0.065325813 0.066081382 0.066618493 0.068436072 0.069263171 0.070289655 0.072797738 0.074485739 0.074805533 0.076531840 0.079158801 0.084550579 0.086958165 0.087194201 0.087693019 0.089745580 0.090697123 0.091543066 0.094290513 0.095069667 0.095894516 0.096504939 0.097869350 0.098855725 0.100231359 0.100842662 0.102426702 0.103222769 0.103641056 0.104175739 0.104596543 0.105072597 0.106377267 0.107079072 0.108245898 0.110073070 0.111205417 0.112490505 0.113581094 0.115094844 0.116294472 0.116870359 0.118771412 0.121365077 0.122531573 0.123791307 0.125352025 0.126252032 0.126389186 0.126788010 0.127777439 0.132162452 0.135114486 0.135882957 0.143153083 0.144058094 0.147096393 0.147663903 0.149789220 0.151898515 0.154676369 0.155013692 0.156710241 0.161374331 0.162007563 0.173825529 0.174472212 0.181981225 0.185354022 0.186561093 0.189678534 0.190447732 0.194469741 0.195770845 0.198962035 0.200384154 0.205233828 0.207183595 0.207471915 0.210289737 0.216808451 0.217232717 0.217975256 0.219997571 0.220892888 0.225418305 0.226759929 0.232413202 0.235209615 0.235732131 0.236108149 0.244751082 0.256136104 0.257355609 0.264011523 0.269981603 0.280789163 0.283758723 0.286389960 0.291984000 0.297049243 0.304516653 0.306028877 0.307328135 0.314538169 0.316833606 0.317456294 0.322268604 0.330177953 0.332937927 0.351844458 0.353038891 0.355267213 0.355989572 0.360095014 0.363093273 0.364610067 0.384224950 0.386067973 0.392257850 0.410574968 0.426105640 0.431291601 0.462507660 0.469351342 0.479149529 0.484608798 0.484639890 0.487577233 0.491494355 0.509704603 0.515594746 0.535422416 0.569387232 0.575398969 0.591570833 0.594261614 0.607422395 0.608453090 0.645031343 0.647954440 0.649802870 0.674456402 0.678473832 0.688179753 0.693474718 0.694045759 0.700357519 0.704854083 0.718499895 0.742278177 0.751445861 0.759465615 0.772107797 0.774720952 0.779743502 0.811030085 0.816520528 0.820194587 0.823140676 0.823747828 0.832332981 0.835065835 0.838045411 0.842698734 0.845962767 0.847701394 0.850237122 0.859799011 0.865956671 0.869005740 0.874714201 0.886332785 0.888467648 0.889854430 0.900825224 0.901117083 0.904201613 0.924149260 0.928250271 0.936616841 0.938167526 0.966391410 0.977161601 0.987405547 1.001802755 1.020383840 1.028833312 1.042610843 1.052669805 1.058712004 1.069187937 1.087007562 1.089006243 1.105246821 1.111716086 1.112839811 1.127798922 1.136485892 1.141232710 1.145373633 1.176786811 1.179201204 1.181855337 1.187573039 1.191662590 1.198528217 1.224769183 1.229046061 1.274869714 1.303077451 1.321419421 1.328468174 1.333381125 1.336710753 1.338207993 1.342403293 1.344401735 1.345238595 1.359925273 1.379695892 1.383497993 1.386058465 1.409283809 1.421010465 1.431535553 1.551517983 1.686566556 1.776578628</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">307</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33047332" y3="0.06021427" z3="-0.19096752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37425026" y3="0.16974117" z3="0.42497086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.63873013" y3="0.44551399" z3="-0.33683655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73003894" y3="1.24303397" z3="-2.26524933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38331618" y3="0.4454534" z3="-1.18686123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7350921" y3="0.85312051" z3="-3.67210136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6406034" y3="1.75504571" z3="-3.14478789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39725573" y3="2.59783969" z3="-4.63943798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.57120035" y3="1.25786215" z3="-4.39054206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.52114045" y3="2.93340813" z3="-5.20303352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92677495" y3="-0.47706955" z3="-3.44684977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09128565" y3="0.05937799" z3="-1.00804582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39650534" y3="-1.08616893" z3="-2.00728572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92444963" y3="-0.95466962" z3="-1.8396797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09787923" y3="-2.41047814" z3="-1.84712432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14374548" y3="-3.61794081" z3="0.68249518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01707171" y3="-5.2328096" z3="-4.74172212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24484033" y3="-4.98165177" z3="-3.70225973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84095093" y3="-4.30744549" z3="-1.0783939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77926685" y3="-4.57030287" z3="-2.85104791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55926821" y3="-5.08228137" z3="-3.24164248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85823458" y3="-4.7401152" z3="-1.92525331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49321965" y3="-4.24775623" z3="-1.52287991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81053326" y3="-4.48027015" z3="-3.200036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35666866" y3="-5.39916395" z3="-3.91654871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89353538" y3="-4.78789157" z3="-1.57931814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03084429" y3="-3.86506254" z3="0.2444092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17170339" y3="-3.65618613" z3="0.88990048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05794781" y3="-4.12091885" z3="0.45560353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1667841" y3="-3.52464012" z3="2.35735051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22501602" y3="-3.34723301" z3="5.15577028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36236834" y3="-3.73373653" z3="3.06023977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00010228" y3="-3.23337447" z3="3.07985148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02642602" y3="-3.14523194" z3="4.46871039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3906276" y3="-3.6470826" z3="4.44932944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27710402" y3="-3.97380809" z3="2.51138848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0408396" y3="-3.09726227" z3="2.57579757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09729604" y3="-2.93868184" z3="5.0076556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32857419" y3="-3.82097377" z3="4.98401729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2451921" y3="-3.28630665" z3="6.24747372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41223507" y3="-3.87886097" z3="-0.61993446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17062899" y3="-3.37483116" z3="-1.07404014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52866735" y3="0.25330582" z3="-4.7244312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08693459" y3="-1.7321247" z3="0.0360774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91223365" y3="-0.98055097" z3="1.19759893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85465213" y3="-0.3219565" z3="1.52780011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37815466" y3="0.546073" z3="1.22030665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46589817" y3="1.45125598" z3="-0.4025445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97160027" y3="-0.71384654" z3="1.38464787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34904842" y3="1.73413552" z3="2.6683068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88411809" y3="-0.97723438" z3="2.09859382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65427329" y3="-0.36466066" z3="3.3575397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22762581" y3="0.76519785" z3="-1.2332649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30586434" y3="2.2436598" z3="-0.39805152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44790262" y3="1.93232396" z3="-0.55744808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00610295" y3="-1.08266045" z3="2.4231374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94326438" y3="-0.25054152" z3="1.14311815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84236559" y3="-1.55259737" z3="0.68140431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.39839042" y3="1.192532" z3="3.62954331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58950338" y3="2.31789169" z3="2.65920062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18878668" y3="2.4506832" z3="2.62811415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78887019" y3="-0.8186924" z3="3.86632689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56657322" y3="-0.54341653" z3="3.94180466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48774815" y3="0.71855432" z3="3.23878238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.82691435" y3="-0.69645071" z3="0.99034289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40751673" y3="-2.02554895" z3="0.85151026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75624127" y3="-2.67430063" z3="1.89333491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54134315" y3="-1.98086048" z3="3.08071117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01223439" y3="-0.68576442" z3="3.27597629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66307915" y3="-0.05053503" z3="2.22304815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51765797" y3="-2.52369066" z3="-0.1130415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36520132" y3="-3.68505629" z3="1.76958799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6824938" y3="-2.58471123" z3="4.1044218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82525047" y3="-0.17605278" z3="4.22177737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00051334" y3="0.9830533" z3="2.33838693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78563094" y3="0.47421604" z3="-4.29169877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7665353" y3="-0.49352233" z3="-4.46198695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42283927" y3="-1.68557672" z3="-5.08958776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13965956" y3="-1.91675702" z3="-5.57560522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83453175" y3="-0.94583291" z3="-5.38181887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02673362" y3="1.39782568" z3="-3.75891759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78281728" y3="-0.3473118" z3="-4.09518919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43626978" y3="-2.73441336" z3="-5.22343364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08713521" y3="-2.85716167" z3="-6.07764093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85421243" y3="-1.131627" z3="-5.72348146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34842865" y3="-1.89170499" z3="5.04599865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3132576" y3="-3.72850372" z3="3.93693635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21612601" y3="-3.63938673" z3="-5.99952159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43705459" y3="-2.64522266" z3="-4.53986825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06998932" y3="1.16425522" z3="-1.48503013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11482161" y3="1.5542749" z3="-2.4683638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44080345" y3="1.48916576" z3="-1.67752216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85786856" y3="2.15016588" z3="-2.80672425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16277279" y3="1.19118737" z3="-0.91086312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91578498" y3="2.38893485" z3="-2.94684393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58252366" y3="2.21926942" z3="-3.63619327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91567231" y3="2.50789746" z3="-3.80078348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86564442" y3="2.4915305" z3="-4.41427202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2526331" y3="3.01223153" z3="-4.71059483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41547894" y3="3.15854928" z3="-3.35051257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30562519" y3="3.57060322" z3="-4.14568213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22374724" y3="4.17006432" z3="-2.75833217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97982658" y3="5.5024286" z3="-2.99170065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04764385" y3="3.88195628" z3="-2.10357256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61673505" y3="6.25884041" z3="-2.52335302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08765821" y3="4.95613194" z3="-4.38089087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90933646" y3="5.9051607" z3="-3.82494899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24068497" y3="5.25338975" z3="-5.00700967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73094308" y3="6.9678942" z3="-4.01039048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48416618" y3="-2.21492166" z3="-0.27997248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45328907" y3="-3.00763674" z3="-1.04672072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00974288" y3="-2.59864491" z3="0.60906967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10254178" y3="-1.39746273" z3="-0.69692421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18824038" y3="-1.42969817" z3="-1.1368518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32887529" y3="-0.38865015" z3="-1.48085089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11056394" y3="-1.55351239" z3="-0.93661933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.43035272" y3="-2.08157713" z3="-1.98947354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3305,.0602,-.191;7.3743,.1697,.425;6.6387,.4455,-.3368;4.73,1.243,-2.2652;4.3833,.4455,-1.1869;2.7351,.8531,-3.6721;3.6406,1.755,-3.1448;1.3973,2.5978,-4.6394;1.5712,1.2579,-4.3905;.5211,2.9334,-5.203;2.9268,-.4771,-3.4468;3.0913,.0594,-1.008;2.3965,-1.0862,-2.0073;.9244,-.9547,-1.8397;3.0979,-2.4105,-1.8471;-.1437,-3.6179,.6825;-.0171,-5.2328,-4.7417;-.2448,-4.9817,-3.7023;-.841,-4.3074,-1.0784;.7793,-4.5703,-2.851;-1.5593,-5.0823,-3.2416;-1.8582,-4.7401,-1.9253;.4932,-4.2478,-1.5229;1.8105,-4.4803,-3.2;-2.3567,-5.3992,-3.9165;-2.8935,-4.7879,-1.5793;-1.0308,-3.8651,.2444;-2.1717,-3.6562,.8899;-3.0579,-4.1209,.4556;-2.1668,-3.5246,2.3574;-2.225,-3.3472,5.1558;-3.3624,-3.7337,3.0602;-1.0001,-3.2334,3.0799;-1.0264,-3.1452,4.4687;-3.3906,-3.6471,4.4493;-4.2771,-3.9738,2.5114;-.0408,-3.0973,2.5758;-.0973,-2.9387,5.0077;-4.3286,-3.821,4.984;-2.2452,-3.2863,6.2475;1.4122,-3.8789,-.6199;2.1706,-3.3748,-1.074;.5287,.2533,-4.7244;-3.0869,-1.7321,.0361;-2.9122,-.9806,1.1976;-1.8547,-.322,1.5278;-.3782,.5461,1.2203;-.4659,1.4513,-.4025;.9716,-.7138,1.3846;-.349,1.7341,2.6683;-3.8841,-.9772,2.0986;-3.6543,-.3647,3.3575;-.2276,.7652,-1.2333;.3059,2.2437,-.3981;-1.4479,1.9323,-.5574;1.0061,-1.0827,2.4231;1.9433,-.2505,1.1431;.8424,-1.5526,.6814;-.3984,1.1925,3.6295;.5895,2.3179,2.6592;-1.1888,2.4507,2.6281;-2.7889,-.8187,3.8663;-4.5666,-.5434,3.9418;-3.4877,.7186,3.2388;4.8269,-.6965,.9903;4.4075,-2.0255,.8515;3.7562,-2.6743,1.8933;3.5413,-1.9809,3.0807;4.0122,-.6858,3.276;4.6631,-.0505,2.223;4.5177,-2.5237,-.113;3.3652,-3.6851,1.7696;2.6825,-2.5847,4.1044;3.8253,-.1761,4.2218;5.0005,.9831,2.3384;-.7856,.4742,-4.2917;-1.7665,-.4935,-4.462;-1.4228,-1.6856,-5.0896;-.1397,-1.9168,-5.5756;.8345,-.9458,-5.3818;-1.0267,1.3978,-3.7589;-2.7828,-.3473,-4.0952;-2.4363,-2.7344,-5.2234;.0871,-2.8572,-6.0776;1.8542,-1.1316,-5.7235;2.3484,-1.8917,5.046;2.3133,-3.7285,3.9369;-2.2161,-3.6394,-5.9995;-3.4371,-2.6452,-4.5399;7.07,1.1643,-1.485;6.1148,1.5543,-2.4684;8.4408,1.4892,-1.6775;8.8579,2.1502,-2.8067;9.1628,1.1912,-.9109;9.9158,2.3889,-2.9468;6.5825,2.2193,-3.6362;7.9157,2.5079,-3.8008;5.8656,2.4915,-4.4143;8.2526,3.0122,-4.7106;3.4155,3.1585,-3.3505;2.3056,3.5706,-4.1457;4.2237,4.1701,-2.7583;3.9798,5.5024,-2.9917;5.0476,3.882,-2.1036;4.6167,6.2588,-2.5234;2.0877,4.9561,-4.3809;2.9093,5.9052,-3.8249;1.2407,5.2534,-5.007;2.7309,6.9679,-4.0104;-4.4842,-2.2149,-.28;-4.4533,-3.0076,-1.0467;-5.0097,-2.5986,.6091;-5.1025,-1.3975,-.6969;-2.1882,-1.4297,-1.1369;-2.3289,-.3887,-1.4809;-1.1106,-1.5535,-.9366;-2.4304,-2.0816,-1.9895;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650419721738</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000988331988 0.000184190128 0.025637707318 0.005334713393</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030742781 -0.000264081 0.000036424 0.000138418 0.000158077 0.000265366 0.000296615 0.000423509 0.000597976 0.000828727 0.000890866 0.000979990 0.001194427 0.001296350 0.001411521 0.001500900 0.001558104 0.001733965 0.001779288 0.001914428 0.002110906 0.002287927 0.002403944 0.002514318 0.002677979 0.003026469 0.003064853 0.003204049 0.003561671 0.003846129 0.004449063 0.004688401 0.004766850 0.005108024 0.006011762 0.006104230 0.006310915 0.006666978 0.006905042 0.007603157 0.008071453 0.008209333 0.008419720 0.009431134 0.009717680 0.010067939 0.010128958 0.011158529 0.011947796 0.012223210 0.013051057 0.013146849 0.014349399 0.014869237 0.015416202 0.015812283 0.016035737 0.016694845 0.016778821 0.017525279 0.018256702 0.018814073 0.019367693 0.019630969 0.020207056 0.020746847 0.021245994 0.021418528 0.022227220 0.023118932 0.023797020 0.026484446 0.026893189 0.027953821 0.028238309 0.029591176 0.030510526 0.031625422 0.033274473 0.033727159 0.034168758 0.035778369 0.037177755 0.037425343 0.039493965 0.039999697 0.040223988 0.041102357 0.042594379 0.044728281 0.045678986 0.047160735 0.048038678 0.049284386 0.050513347 0.051087388 0.051309145 0.051758271 0.052493798 0.052801065 0.052961072 0.053258687 0.054850446 0.054990226 0.056158552 0.056365958 0.056591790 0.057055990 0.057239193 0.059216452 0.060654804 0.061073558 0.061852302 0.062419876 0.063427737 0.064538796 0.065325816 0.066091637 0.066618731 0.068440070 0.069268537 0.070290040 0.072797857 0.074491912 0.074805518 0.076531871 0.079163724 0.084551637 0.086959547 0.087194536 0.087698374 0.089746481 0.090698231 0.091547555 0.094291593 0.095072991 0.095902659 0.096505108 0.097869412 0.098855882 0.100232468 0.100843125 0.102431421 0.103222531 0.103644825 0.104202537 0.104599726 0.105084194 0.106377241 0.107081341 0.108246429 0.110077684 0.111205835 0.112495596 0.113581750 0.115095821 0.116294554 0.116871193 0.118771780 0.121364949 0.122537893 0.123797478 0.125352087 0.126252790 0.126399462 0.126791769 0.127788283 0.132162997 0.135114984 0.135883264 0.143155168 0.144058290 0.147096587 0.147664025 0.149796839 0.151900354 0.154676887 0.155013205 0.156717355 0.161373668 0.162008440 0.173828770 0.174472214 0.182000538 0.185384345 0.186569233 0.189680383 0.190447387 0.194471830 0.195778883 0.198962478 0.200385123 0.205233196 0.207185291 0.207475543 0.210290402 0.216815546 0.217260345 0.217976712 0.220011471 0.220892869 0.225421059 0.226761310 0.232416071 0.235209900 0.235736477 0.236109013 0.244751485 0.256136466 0.257357612 0.264012403 0.269981655 0.280789552 0.283776673 0.286390597 0.291984516 0.297049385 0.304522718 0.306029137 0.307329663 0.314543605 0.316833622 0.317456901 0.322268732 0.330178584 0.332938252 0.351844481 0.353041561 0.355294982 0.355991208 0.360095073 0.363093322 0.364610298 0.384226213 0.386067979 0.392259376 0.410575134 0.426111039 0.431291635 0.462507928 0.469372820 0.479149921 0.484609327 0.484640718 0.487584128 0.491495291 0.509710454 0.515598924 0.535425355 0.569388420 0.575401875 0.591572233 0.594262636 0.607429140 0.608454393 0.645031203 0.647961917 0.649810843 0.674457212 0.678476244 0.688179837 0.693474760 0.694048231 0.700360244 0.704854185 0.718500569 0.742279386 0.751445984 0.759465745 0.772119751 0.774723545 0.779743550 0.811030676 0.816540570 0.820194711 0.823140729 0.823748358 0.832333381 0.835071059 0.838068385 0.842698694 0.845962739 0.847705704 0.850237174 0.859799170 0.865958068 0.869018363 0.874716094 0.886360827 0.888510003 0.889859813 0.900826912 0.901117289 0.904206825 0.924157966 0.928251103 0.936628618 0.938168126 0.966391716 0.977224746 0.987407613 1.001809775 1.020384911 1.028834120 1.042617145 1.052679971 1.058736288 1.069206229 1.087007958 1.089010015 1.105249120 1.111732348 1.112847996 1.127872276 1.136492305 1.141232642 1.145389585 1.176792769 1.179203895 1.181855471 1.187588275 1.191663629 1.198530168 1.224769382 1.229046267 1.274898245 1.303089947 1.321424543 1.328470232 1.333387847 1.336711177 1.338208654 1.342421148 1.344467669 1.345262641 1.359925368 1.379696847 1.383500727 1.386100472 1.409295645 1.421018194 1.431535624 1.551518414 1.686579071 1.776607899</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">308</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33585654" y3="0.06082636" z3="-0.19147027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38163464" y3="0.17452723" z3="0.42135528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64435799" y3="0.44905321" z3="-0.33934569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73117833" y3="1.24215409" z3="-2.26548637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38669081" y3="0.44518951" z3="-1.1857544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73407069" y3="0.85061118" z3="-3.66852393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64018452" y3="1.75332542" z3="-3.14343988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39478783" y3="2.59435354" z3="-4.6362063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56969568" y3="1.25411287" z3="-4.38676852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51831263" y3="2.92878834" z3="-5.19996376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92534157" y3="-0.47906327" z3="-3.44122119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09523177" y3="0.06031033" z3="-1.00334776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39705382" y3="-1.08536876" z3="-1.99974409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9255445" y3="-0.95128862" z3="-1.82954357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09680847" y3="-2.41051885" z3="-1.83958086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14569858" y3="-3.6247101" z3="0.67980153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01575811" y3="-5.23315563" z3="-4.74536153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2445251" y3="-4.98263664" z3="-3.70600851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84369947" y3="-4.30897501" z3="-1.08270894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77820561" y3="-4.57127646" z3="-2.85365571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55899234" y3="-5.08382219" z3="-3.24678562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85933226" y3="-4.74180994" z3="-1.93056002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49086425" y3="-4.24930895" z3="-1.52564818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81032831" y3="-4.48248222" z3="-3.20159631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35761153" y3="-5.39831991" z3="-3.92293717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89536299" y3="-4.78870452" z3="-1.5857329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0343612" y3="-3.86705437" z3="0.24013071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17504586" y3="-3.6564133" z3="0.88516183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06224517" y3="-4.11879503" z3="0.45007225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17032579" y3="-3.52491322" z3="2.35250894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2287474" y3="-3.34521601" z3="5.15071898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36641344" y3="-3.73241217" z3="3.0552466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00327984" y3="-3.23399749" z3="3.07498145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02985612" y3="-3.14446099" z3="4.46369447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39468333" y3="-3.64486338" z3="4.44430257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28103327" y3="-3.9724292" z3="2.50640655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04368918" y3="-3.09869862" z3="2.57081528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10105411" y3="-2.93696027" z3="5.00243683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.332484" y3="-3.81824064" z3="4.97898591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24920836" y3="-3.2830881" z3="6.24232804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40969323" y3="-3.88278993" z3="-0.62100667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16849684" y3="-3.3769094" z3="-1.07251376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52735541" y3="0.24945287" z3="-4.71979414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08408301" y3="-1.72953875" z3="0.0315464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9117552" y3="-0.98083776" z3="1.19511335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85254358" y3="-0.32788346" z3="1.53156209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37681762" y3="0.54441758" z3="1.23265703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46287593" y3="1.45547358" z3="-0.38685333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97536424" y3="-0.71315185" z3="1.39418744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35404561" y3="1.72449755" z3="2.68733378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88778982" y3="-0.97568916" z3="2.0917597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66248649" y3="-0.36380352" z3="3.35194986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22216026" y3="0.77227688" z3="-1.21952808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30717687" y3="2.24943196" z3="-0.37827181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4455728" y3="1.93505473" z3="-0.54199163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00987399" y3="-1.08462807" z3="2.43176624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94680249" y3="-0.24787183" z3="1.15426636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84817762" y3="-1.55012003" z3="0.68905329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40451192" y3="1.17627104" z3="3.64487026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58285854" y3="2.31077486" z3="2.68483833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19565114" y3="2.4387565" z3="2.64961429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79999554" y3="-0.81915823" z3="3.86457163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57779458" y3="-0.54134681" z3="3.93201078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49443511" y3="0.7191633" z3="3.23409625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83374786" y3="-0.69417622" z3="0.99146301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41551585" y3="-2.023813" z3="0.85479507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76429177" y3="-2.67102529" z3="1.89762432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5476038" y3="-1.97538701" z3="3.08347674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01705049" y3="-0.67966723" z3="3.27632133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66870774" y3="-0.04608829" z3="2.2229213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52617525" y3="-2.52360146" z3="-0.10905355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37444224" y3="-3.68228771" z3="1.77575167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6864" y3="-2.57716095" z3="4.10652442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82831428" y3="-0.16803102" z3="4.22073774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00576882" y3="0.98796785" z3="2.33710187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78705195" y3="0.47085476" z3="-4.28746172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76861155" y3="-0.49608317" z3="-4.46111575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42544041" y3="-1.68764832" z3="-5.08852313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14173763" y3="-1.91940978" z3="-5.57305808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83294383" y3="-0.94959806" z3="-5.37808899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02768062" y3="1.39417225" z3="-3.75461861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78520589" y3="-0.34952213" z3="-4.09498269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43963718" y3="-2.73510593" z3="-5.22490548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08522709" y3="-2.85954179" z3="-6.07640879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85275459" y3="-1.13599034" z3="-5.71888496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34700099" y3="-1.88131643" z3="5.04354783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31944077" y3="-3.72209098" z3="3.94165241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22023793" y3="-3.63795888" z3="-6.00415187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43982338" y3="-2.64697648" z3="-4.54081073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07298843" y3="1.165464" z3="-1.48962912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11553015" y3="1.55329067" z3="-2.47175667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44301262" y3="1.48905362" z3="-1.68581352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85763856" y3="2.14911203" z3="-2.81658403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16649391" y3="1.19144971" z3="-0.92055446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91523042" y3="2.38799242" z3="-2.95921971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58053425" y3="2.21651155" z3="-3.64140979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91363001" y3="2.50671681" z3="-3.8088003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86208985" y3="2.48825394" z3="-4.41818064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24874714" y3="3.01187051" z3="-4.71955758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41445619" y3="3.15671208" z3="-3.3503208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30339612" y3="3.56776219" z3="-4.14439226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22364617" y3="4.16889845" z3="-2.76088893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97877584" y3="5.50128123" z3="-2.99510655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0487268" y3="3.88164938" z3="-2.10719158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61739767" y3="6.2572307" z3="-2.53041867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08483638" y3="4.95288039" z3="-4.38102063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90716241" y3="5.90267072" z3="-3.82750743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23699555" y3="5.24911027" z3="-5.0064737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72777973" y3="6.96545355" z3="-4.01356183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48141278" y3="-2.20822162" z3="-0.2904041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44992019" y3="-2.99781776" z3="-1.06031718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01019936" y3="-2.59426686" z3="0.59601856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09692286" y3="-1.38773264" z3="-0.70573002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17974681" y3="-1.42825047" z3="-1.13724249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31697415" y3="-0.38635985" z3="-1.48114026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10346471" y3="-1.55304208" z3="-0.93227205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41974398" y3="-2.07963106" z3="-1.99121028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3359,.0608,-.1915;7.3816,.1745,.4214;6.6444,.4491,-.3393;4.7312,1.2422,-2.2655;4.3867,.4452,-1.1858;2.7341,.8506,-3.6685;3.6402,1.7533,-3.1434;1.3948,2.5944,-4.6362;1.5697,1.2541,-4.3868;.5183,2.9288,-5.2;2.9253,-.4791,-3.4412;3.0952,.0603,-1.0033;2.3971,-1.0854,-1.9997;.9255,-.9513,-1.8295;3.0968,-2.4105,-1.8396;-.1457,-3.6247,.6798;-.0158,-5.2332,-4.7454;-.2445,-4.9826,-3.706;-.8437,-4.309,-1.0827;.7782,-4.5713,-2.8537;-1.559,-5.0838,-3.2468;-1.8593,-4.7418,-1.9306;.4909,-4.2493,-1.5256;1.8103,-4.4825,-3.2016;-2.3576,-5.3983,-3.9229;-2.8954,-4.7887,-1.5857;-1.0344,-3.8671,.2401;-2.175,-3.6564,.8852;-3.0622,-4.1188,.4501;-2.1703,-3.5249,2.3525;-2.2287,-3.3452,5.1507;-3.3664,-3.7324,3.0552;-1.0033,-3.234,3.075;-1.0299,-3.1445,4.4637;-3.3947,-3.6449,4.4443;-4.281,-3.9724,2.5064;-.0437,-3.0987,2.5708;-.1011,-2.937,5.0024;-4.3325,-3.8182,4.979;-2.2492,-3.2831,6.2423;1.4097,-3.8828,-.621;2.1685,-3.3769,-1.0725;.5274,.2495,-4.7198;-3.0841,-1.7295,.0315;-2.9118,-.9808,1.1951;-1.8525,-.3279,1.5316;-.3768,.5444,1.2327;-.4629,1.4555,-.3869;.9754,-.7132,1.3942;-.354,1.7245,2.6873;-3.8878,-.9757,2.0918;-3.6625,-.3638,3.3519;-.2222,.7723,-1.2195;.3072,2.2494,-.3783;-1.4456,1.9351,-.542;1.0099,-1.0846,2.4318;1.9468,-.2479,1.1543;.8482,-1.5501,.6891;-.4045,1.1763,3.6449;.5829,2.3108,2.6848;-1.1957,2.4388,2.6496;-2.8,-.8192,3.8646;-4.5778,-.5413,3.932;-3.4944,.7192,3.2341;4.8337,-.6942,.9915;4.4155,-2.0238,.8548;3.7643,-2.671,1.8976;3.5476,-1.9754,3.0835;4.0171,-.6797,3.2763;4.6687,-.0461,2.2229;4.5262,-2.5236,-.1091;3.3744,-3.6823,1.7758;2.6864,-2.5772,4.1065;3.8283,-.168,4.2207;5.0058,.988,2.3371;-.7871,.4709,-4.2875;-1.7686,-.4961,-4.4611;-1.4254,-1.6876,-5.0885;-.1417,-1.9194,-5.5731;.8329,-.9496,-5.3781;-1.0277,1.3942,-3.7546;-2.7852,-.3495,-4.095;-2.4396,-2.7351,-5.2249;.0852,-2.8595,-6.0764;1.8528,-1.136,-5.7189;2.347,-1.8813,5.0435;2.3194,-3.7221,3.9417;-2.2202,-3.638,-6.0042;-3.4398,-2.647,-4.5408;7.073,1.1655,-1.4896;6.1155,1.5533,-2.4718;8.443,1.4891,-1.6858;8.8576,2.1491,-2.8166;9.1665,1.1914,-.9206;9.9152,2.388,-2.9592;6.5805,2.2165,-3.6414;7.9136,2.5067,-3.8088;5.8621,2.4883,-4.4182;8.2487,3.0119,-4.7196;3.4145,3.1567,-3.3503;2.3034,3.5678,-4.1444;4.2236,4.1689,-2.7609;3.9788,5.5013,-2.9951;5.0487,3.8816,-2.1072;4.6174,6.2572,-2.5304;2.0848,4.9529,-4.381;2.9072,5.9027,-3.8275;1.237,5.2491,-5.0065;2.7278,6.9655,-4.0136;-4.4814,-2.2082,-.2904;-4.4499,-2.9978,-1.0603;-5.0102,-2.5943,.596;-5.0969,-1.3877,-.7057;-2.1797,-1.4283,-1.1372;-2.317,-.3864,-1.4811;-1.1035,-1.553,-.9323;-2.4197,-2.0796,-1.9912;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422547131</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001079033514 0.000220757591 0.022816085163 0.005351835213</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030747605 -0.000200551 -0.000086496 0.000110279 0.000236757 0.000273303 0.000317485 0.000400765 0.000589132 0.000833083 0.000869972 0.000976211 0.001188585 0.001267886 0.001417310 0.001485400 0.001555401 0.001713805 0.001779660 0.001914587 0.001999880 0.002259750 0.002394278 0.002514003 0.002677659 0.003018782 0.003058178 0.003133925 0.003561246 0.003852947 0.004426950 0.004667790 0.004771415 0.005108163 0.006007677 0.006113658 0.006301049 0.006666966 0.006883809 0.007585321 0.008002032 0.008215016 0.008405468 0.009430086 0.009621027 0.010066489 0.010112587 0.011160678 0.011912121 0.012207880 0.013012176 0.013151348 0.014364508 0.014868994 0.015409886 0.015829079 0.016000829 0.016603143 0.016781301 0.017532824 0.018258219 0.018822370 0.019365418 0.019637577 0.020203307 0.020737118 0.021246128 0.021411502 0.022199342 0.023102514 0.023749046 0.026487274 0.026894435 0.027967572 0.028243019 0.029593154 0.030516017 0.031628238 0.033250961 0.033730097 0.034166188 0.035777204 0.037181121 0.037422360 0.039464799 0.039965493 0.040221167 0.041104119 0.042594638 0.044729079 0.045699501 0.047159907 0.048038023 0.049284655 0.050513456 0.051087495 0.051309706 0.051771817 0.052493953 0.052805965 0.052960205 0.053260319 0.054853028 0.054990461 0.056183693 0.056372910 0.056592009 0.057062845 0.057240501 0.059217713 0.060654465 0.061075077 0.061858052 0.062417732 0.063431937 0.064539690 0.065323895 0.066094068 0.066618426 0.068451711 0.069273978 0.070289143 0.072800643 0.074500078 0.074805485 0.076535559 0.079184314 0.084558773 0.086961095 0.087195792 0.087703538 0.089754610 0.090702156 0.091556279 0.094295958 0.095075357 0.095905765 0.096505421 0.097869161 0.098855752 0.100235751 0.100845701 0.102438657 0.103223485 0.103649575 0.104255793 0.104596076 0.105107465 0.106373212 0.107083900 0.108250579 0.110081043 0.111208434 0.112506080 0.113579159 0.115101773 0.116293302 0.116867552 0.118773723 0.121371878 0.122542822 0.123808605 0.125387527 0.126256769 0.126409853 0.126795158 0.127809706 0.132168324 0.135113835 0.135883999 0.143165123 0.144061295 0.147094864 0.147670956 0.149790300 0.151874484 0.154677296 0.155011421 0.156727694 0.161351100 0.162012687 0.173829944 0.174473769 0.182013012 0.185431814 0.186584542 0.189686986 0.190443019 0.194478994 0.195797917 0.198966220 0.200387960 0.205234181 0.207189742 0.207477924 0.210292351 0.216819735 0.217316352 0.217973062 0.220060164 0.220891210 0.225428806 0.226762895 0.232422413 0.235213454 0.235741635 0.236114343 0.244752560 0.256138550 0.257363338 0.264011272 0.269984102 0.280790424 0.283798446 0.286393103 0.291985973 0.297049780 0.304536717 0.306036240 0.307327925 0.314562379 0.316834232 0.317457038 0.322269880 0.330180072 0.332940686 0.351845264 0.353046407 0.355342845 0.355992569 0.360095555 0.363094294 0.364610945 0.384201466 0.386039414 0.392251680 0.410577848 0.426116372 0.431291687 0.462510155 0.469399533 0.479159321 0.484613054 0.484641971 0.487587061 0.491496002 0.509720424 0.515592054 0.535415917 0.569380672 0.575409868 0.591547733 0.594264362 0.607410171 0.608438751 0.645039780 0.647967418 0.649818381 0.674465040 0.678482870 0.688194407 0.693477793 0.694050544 0.700360380 0.704855290 0.718503056 0.742282059 0.751446060 0.759465861 0.772139729 0.774754572 0.779746523 0.811032672 0.816565655 0.820200046 0.823140795 0.823750255 0.832336224 0.835076898 0.838095756 0.842702336 0.845963044 0.847727452 0.850238956 0.859809324 0.865960664 0.869057077 0.874724120 0.886397039 0.888594692 0.889871021 0.900833584 0.901109234 0.904207928 0.924169542 0.928256828 0.936642986 0.938171188 0.966393613 0.977302215 0.987413100 1.001824839 1.020385154 1.028840384 1.042628347 1.052704224 1.058778555 1.069227917 1.087010422 1.089019450 1.105258249 1.111762507 1.112865065 1.127982825 1.136500300 1.141239239 1.145428630 1.176797920 1.179208661 1.181856244 1.187605515 1.191668339 1.198547221 1.224771671 1.229056520 1.274808677 1.303086443 1.321427212 1.328472989 1.333399506 1.336711362 1.338162831 1.342355618 1.344548439 1.345296782 1.359923187 1.379710814 1.383499790 1.386140764 1.409131996 1.421039598 1.431505336 1.551518442 1.686623228 1.776618901</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">309</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34157393" y3="0.05724664" z3="-0.19276468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38742928" y3="0.17321964" z3="0.41723086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64871747" y3="0.44614563" z3="-0.34265794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73177079" y3="1.23780383" z3="-2.26555453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39031542" y3="0.43993533" z3="-1.18588607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73210519" y3="0.84631822" z3="-3.66526811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63833612" y3="1.7487752" z3="-3.14062439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38851031" y3="2.59039294" z3="-4.62588314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56567742" y3="1.25013265" z3="-4.3799922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51031256" y3="2.92545404" z3="-5.18650072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92553404" y3="-0.48364014" z3="-3.44038873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09956151" y3="0.05257544" z3="-1.00197296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.3996309" y3="-1.09159554" z3="-1.99872806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92845367" y3="-0.95667929" z3="-1.8259675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09859347" y3="-2.41746797" z3="-1.84116834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14805444" y3="-3.62034774" z3="0.67598894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01621381" y3="-5.24133774" z3="-4.74517585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24539227" y3="-4.98830774" z3="-3.70645602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84520941" y3="-4.30948774" z3="-1.08457353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77814881" y3="-4.57818455" z3="-2.8537205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56107842" y3="-5.08535439" z3="-3.2482297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86196207" y3="-4.74071514" z3="-1.93286252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49019445" y3="-4.25356186" z3="-1.52649725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80997953" y3="-4.4904682" z3="-3.20066031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35759892" y3="-5.40195154" z3="-3.92417949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89779493" y3="-4.7861026" z3="-1.58895918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03586201" y3="-3.8650818" z3="0.23738168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17653543" y3="-3.65243941" z3="0.88194132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06414794" y3="-4.11466395" z3="0.44773476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17118784" y3="-3.51900495" z3="2.34918975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22793077" y3="-3.33653" z3="5.14730397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36671821" y3="-3.72574204" z3="3.052799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00395771" y3="-3.22700403" z3="3.07073161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02960538" y3="-3.13620098" z3="4.45940534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39410855" y3="-3.6368508" z3="4.44182996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28216832" y3="-3.96550781" z3="2.50454456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04467901" y3="-3.0918212" z3="2.56592189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10004536" y3="-2.92876328" z3="4.99752927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33178986" y3="-3.80921506" z3="4.97721864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24751882" y3="-3.27373509" z3="6.2389439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40810346" y3="-3.88639944" z3="-0.62174884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1682337" y3="-3.38259991" z3="-1.07342649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52447584" y3="0.24474347" z3="-4.71529503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08214015" y3="-1.72524707" z3="0.02597148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90972675" y3="-0.97709231" z3="1.18980372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84841271" y3="-0.328659" z3="1.52813084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37377163" y3="0.54676209" z3="1.23355228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45586748" y3="1.45636426" z3="-0.3871995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98018891" y3="-0.70893345" z3="1.39986334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35958757" y3="1.72867736" z3="2.68686564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88738553" y3="-0.96853906" z3="2.08464573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6629734" y3="-0.35623302" z3="3.3447084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21104567" y3="0.77238095" z3="-1.21794695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31230677" y3="2.25223982" z3="-0.37686343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43917962" y3="1.93345089" z3="-0.54659396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01508047" y3="-1.07643614" z3="2.43862683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9512655" y3="-0.24417177" z3="1.15772015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85263793" y3="-1.54890843" z3="0.69766667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41040047" y3="1.18143027" z3="3.6450045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57441892" y3="2.31976691" z3="2.68629387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20472539" y3="2.43883929" z3="2.64568017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80259925" y3="-0.81307116" z3="3.85945339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57972226" y3="-0.53101417" z3="3.92315238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49205482" y3="0.72620437" z3="3.22624307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84121953" y3="-0.69835311" z3="0.99056234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41973058" y3="-2.02701105" z3="0.85349536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76733797" y3="-2.67321326" z3="1.89622237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55278294" y3="-1.97755538" z3="3.08235665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02655627" y3="-0.68330244" z3="3.27613424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67919083" y3="-0.05078268" z3="2.22267853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52824793" y3="-2.52664022" z3="-0.11063873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37440751" y3="-3.68338987" z3="1.77380952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68950729" y3="-2.57722054" z3="4.10488093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83986768" y3="-0.1715725" z3="4.2209216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01867151" y3="0.98240898" z3="2.33690199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79071879" y3="0.464406" z3="-4.28485306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77142285" y3="-0.50275656" z3="-4.46052954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42639235" y3="-1.6931948" z3="-5.0899876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14202651" y3="-1.9233754" z3="-5.57329771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83182958" y3="-0.95302452" z3="-5.37470558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03300893" y3="1.38672171" z3="-3.75047541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78854944" y3="-0.35722623" z3="-4.09613076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43938048" y3="-2.74171876" z3="-5.228858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08597612" y3="-2.86249125" z3="-6.07729813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85220193" y3="-1.13802014" z3="-5.71465317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34994503" y3="-1.8796586" z3="5.04106279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32167311" y3="-3.72194044" z3="3.94113868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2193962" y3="-3.64199303" z3="-6.01033834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43920017" y3="-2.65739913" z3="-4.54336019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07466316" y3="1.16523185" z3="-1.49264034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11531332" y3="1.55216847" z3="-2.47324625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44410487" y3="1.49406554" z3="-1.68947568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85578246" y3="2.15578682" z3="-2.82011201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1693394" y3="1.19833663" z3="-0.92502365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91261249" y3="2.39770246" z3="-2.96342649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5774579" y3="2.21775557" z3="-3.64276208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90945292" y3="2.51035654" z3="-3.81146615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85722087" y3="2.48742282" z3="-4.41873972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24215507" y3="3.01498036" z3="-4.7224729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41004719" y3="3.15228483" z3="-3.34316478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29629984" y3="3.56389856" z3="-4.13307568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2185548" y3="4.16416809" z3="-2.75201572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97060961" y3="5.49659107" z3="-2.98118223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04571855" y3="3.87633082" z3="-2.10124713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60789928" y3="6.25312064" z3="-2.51392039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07396439" y3="4.94976367" z3="-4.3637421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89572821" y3="5.89902777" z3="-3.80895352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22376403" y3="5.24669485" z3="-4.98566103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7138931" y3="6.96190927" z3="-3.99074574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4797049" y3="-2.20107968" z3="-0.29839179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44839194" y3="-2.99018267" z3="-1.06871197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.010553" y3="-2.58692134" z3="0.58673365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0931297" y3="-1.37925458" z3="-0.71407336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17487048" y3="-1.42607758" z3="-1.14079624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30992992" y3="-0.38464953" z3="-1.48620018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09912456" y3="-1.55248272" z3="-0.93324672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4136679" y3="-2.07777049" z3="-1.99464979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3416,.0572,-.1928;7.3874,.1732,.4172;6.6487,.4461,-.3427;4.7318,1.2378,-2.2656;4.3903,.4399,-1.1859;2.7321,.8463,-3.6653;3.6383,1.7488,-3.1406;1.3885,2.5904,-4.6259;1.5657,1.2501,-4.38;.5103,2.9255,-5.1865;2.9255,-.4836,-3.4404;3.0996,.0526,-1.002;2.3996,-1.0916,-1.9987;.9285,-.9567,-1.826;3.0986,-2.4175,-1.8412;-.1481,-3.6203,.676;-.0162,-5.2413,-4.7452;-.2454,-4.9883,-3.7065;-.8452,-4.3095,-1.0846;.7781,-4.5782,-2.8537;-1.5611,-5.0854,-3.2482;-1.862,-4.7407,-1.9329;.4902,-4.2536,-1.5265;1.81,-4.4905,-3.2007;-2.3576,-5.402,-3.9242;-2.8978,-4.7861,-1.589;-1.0359,-3.8651,.2374;-2.1765,-3.6524,.8819;-3.0641,-4.1147,.4477;-2.1712,-3.519,2.3492;-2.2279,-3.3365,5.1473;-3.3667,-3.7257,3.0528;-1.004,-3.227,3.0707;-1.0296,-3.1362,4.4594;-3.3941,-3.6369,4.4418;-4.2822,-3.9655,2.5045;-.0447,-3.0918,2.5659;-.1,-2.9288,4.9975;-4.3318,-3.8092,4.9772;-2.2475,-3.2737,6.2389;1.4081,-3.8864,-.6217;2.1682,-3.3826,-1.0734;.5245,.2447,-4.7153;-3.0821,-1.7252,.026;-2.9097,-.9771,1.1898;-1.8484,-.3287,1.5281;-.3738,.5468,1.2336;-.4559,1.4564,-.3872;.9802,-.7089,1.3999;-.3596,1.7287,2.6869;-3.8874,-.9685,2.0846;-3.663,-.3562,3.3447;-.211,.7724,-1.2179;.3123,2.2522,-.3769;-1.4392,1.9335,-.5466;1.0151,-1.0764,2.4386;1.9513,-.2442,1.1577;.8526,-1.5489,.6977;-.4104,1.1814,3.645;.5744,2.3198,2.6863;-1.2047,2.4388,2.6457;-2.8026,-.8131,3.8595;-4.5797,-.531,3.9232;-3.4921,.7262,3.2262;4.8412,-.6984,.9906;4.4197,-2.027,.8535;3.7673,-2.6732,1.8962;3.5528,-1.9776,3.0824;4.0266,-.6833,3.2761;4.6792,-.0508,2.2227;4.5282,-2.5266,-.1106;3.3744,-3.6834,1.7738;2.6895,-2.5772,4.1049;3.8399,-.1716,4.2209;5.0187,.9824,2.3369;-.7907,.4644,-4.2849;-1.7714,-.5028,-4.4605;-1.4264,-1.6932,-5.09;-.142,-1.9234,-5.5733;.8318,-.953,-5.3747;-1.033,1.3867,-3.7505;-2.7885,-.3572,-4.0961;-2.4394,-2.7417,-5.2289;.086,-2.8625,-6.0773;1.8522,-1.138,-5.7147;2.3499,-1.8797,5.0411;2.3217,-3.7219,3.9411;-2.2194,-3.642,-6.0103;-3.4392,-2.6574,-4.5434;7.0747,1.1652,-1.4926;6.1153,1.5522,-2.4732;8.4441,1.4941,-1.6895;8.8558,2.1558,-2.8201;9.1693,1.1983,-.925;9.9126,2.3977,-2.9634;6.5775,2.2178,-3.6428;7.9095,2.5104,-3.8115;5.8572,2.4874,-4.4187;8.2422,3.015,-4.7225;3.41,3.1523,-3.3432;2.2963,3.5639,-4.1331;4.2186,4.1642,-2.752;3.9706,5.4966,-2.9812;5.0457,3.8763,-2.1012;4.6079,6.2531,-2.5139;2.074,4.9498,-4.3637;2.8957,5.899,-3.809;1.2238,5.2467,-4.9857;2.7139,6.9619,-3.9907;-4.4797,-2.2011,-.2984;-4.4484,-2.9902,-1.0687;-5.0106,-2.5869,.5867;-5.0931,-1.3793,-.7141;-2.1749,-1.4261,-1.1408;-2.3099,-.3846,-1.4862;-1.0991,-1.5525,-.9332;-2.4137,-2.0778,-1.9946;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424292091</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000982438696 0.000172722836 0.020908754097 0.005343541566</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030749735 -0.000292135 -0.000020036 0.000184797 0.000237281 0.000302674 0.000400824 0.000417640 0.000588431 0.000832788 0.000880143 0.000976718 0.001186425 0.001242457 0.001414655 0.001486554 0.001553222 0.001722247 0.001780150 0.001916405 0.002000315 0.002260329 0.002394795 0.002510331 0.002677108 0.003020940 0.003064456 0.003128519 0.003563876 0.003853435 0.004425059 0.004667590 0.004772965 0.005108075 0.006008791 0.006114575 0.006297699 0.006667124 0.006879607 0.007584540 0.007993264 0.008216493 0.008405082 0.009430697 0.009612077 0.010066200 0.010112388 0.011161455 0.011909653 0.012209133 0.013008113 0.013152880 0.014366098 0.014870135 0.015409471 0.015828901 0.015998095 0.016601619 0.016782333 0.017533927 0.018260329 0.018825337 0.019361782 0.019638854 0.020202957 0.020736439 0.021245849 0.021410057 0.022196724 0.023103440 0.023742887 0.026486685 0.026895727 0.027975488 0.028246126 0.029593957 0.030516971 0.031629151 0.033248432 0.033732585 0.034165435 0.035777763 0.037179592 0.037418980 0.039461183 0.039957734 0.040219276 0.041104644 0.042595662 0.044728670 0.045704655 0.047161927 0.048038458 0.049284593 0.050513757 0.051088291 0.051309836 0.051772134 0.052493938 0.052812062 0.052960465 0.053261030 0.054853488 0.054990532 0.056186961 0.056374756 0.056592026 0.057063351 0.057242752 0.059217650 0.060655661 0.061075878 0.061858579 0.062417969 0.063432133 0.064540168 0.065323248 0.066095606 0.066618725 0.068452927 0.069277962 0.070288908 0.072802556 0.074509772 0.074805531 0.076536510 0.079190539 0.084562051 0.086961923 0.087196141 0.087704613 0.089757763 0.090707196 0.091556593 0.094297679 0.095074990 0.095908431 0.096505704 0.097869448 0.098855731 0.100236742 0.100846418 0.102443829 0.103223849 0.103657161 0.104317991 0.104603269 0.105137471 0.106372842 0.107088462 0.108256616 0.110082873 0.111210304 0.112506944 0.113580161 0.115102571 0.116293343 0.116868927 0.118774650 0.121372772 0.122545670 0.123811868 0.125390051 0.126259702 0.126413639 0.126796389 0.127816163 0.132170890 0.135113893 0.135886113 0.143176400 0.144064500 0.147094976 0.147681618 0.149792537 0.151875550 0.154679027 0.155013558 0.156728571 0.161353626 0.162012816 0.173830170 0.174474400 0.182027279 0.185444904 0.186585246 0.189686959 0.190445299 0.194482366 0.195802561 0.198970160 0.200388746 0.205238581 0.207191146 0.207479915 0.210292899 0.216826883 0.217340798 0.217973479 0.220073739 0.220891205 0.225429762 0.226764814 0.232422849 0.235213880 0.235743282 0.236115582 0.244752991 0.256138719 0.257364643 0.264012252 0.269984399 0.280790823 0.283813236 0.286393833 0.291986178 0.297049909 0.304540675 0.306036943 0.307327687 0.314565311 0.316834471 0.317458078 0.322270162 0.330186130 0.332943469 0.351845612 0.353046913 0.355349100 0.355992699 0.360095673 0.363094745 0.364612226 0.384207038 0.386038935 0.392251255 0.410580358 0.426116628 0.431293092 0.462510986 0.469413615 0.479166402 0.484612960 0.484642932 0.487588277 0.491496719 0.509723079 0.515596122 0.535420058 0.569386490 0.575411505 0.591551730 0.594265275 0.607413429 0.608442271 0.645040062 0.647969397 0.649821028 0.674472910 0.678482854 0.688221856 0.693490493 0.694077793 0.700366095 0.704855756 0.718504112 0.742282346 0.751447436 0.759466092 0.772143495 0.774756653 0.779750081 0.811033823 0.816568330 0.820203686 0.823141826 0.823754559 0.832338103 0.835077644 0.838106270 0.842704432 0.845963119 0.847735592 0.850239914 0.859817634 0.865960961 0.869068691 0.874725045 0.886420946 0.888654917 0.889871527 0.900835465 0.901110149 0.904208457 0.924173723 0.928264101 0.936649827 0.938184209 0.966393976 0.977335963 0.987415544 1.001826982 1.020388475 1.028845963 1.042631600 1.052733372 1.058803291 1.069248128 1.087011240 1.089021541 1.105260821 1.111871529 1.112884828 1.128047267 1.136512290 1.141243283 1.145456314 1.176811376 1.179210087 1.181859066 1.187615107 1.191671266 1.198547964 1.224771991 1.229056957 1.274813381 1.303091278 1.321428146 1.328478156 1.333405163 1.336712731 1.338179103 1.342356289 1.344562611 1.345302231 1.359924509 1.379711380 1.383509193 1.386150668 1.409139215 1.421044209 1.431505139 1.551518557 1.686624508 1.776651870</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">310</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34067585" y3="0.05265601" z3="-0.19280082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38687273" y3="0.17044899" z3="0.41697071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64777295" y3="0.44431221" z3="-0.34211639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72950024" y3="1.23701333" z3="-2.26307232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38908498" y3="0.4361483" z3="-1.18510955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73028781" y3="0.84511353" z3="-3.66317121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6349257" y3="1.74835032" z3="-3.13637886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38225337" y3="2.58939851" z3="-4.61736867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56238454" y3="1.24836497" z3="-4.37599087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5030805" y3="2.92397657" z3="-5.17683713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92664439" y3="-0.48499181" z3="-3.44155566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09893777" y3="0.04697433" z3="-1.00208928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40157469" y3="-1.0969681" z3="-2.00115138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9300239" y3="-0.96521011" z3="-1.82914479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10286112" y3="-2.42169666" z3="-1.8450812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14356996" y3="-3.62157983" z3="0.67753346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0171321" y3="-5.24482666" z3="-4.74415135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24516484" y3="-4.99121566" z3="-3.70532974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84249931" y3="-4.30935086" z3="-1.08356051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77889039" y3="-4.58157468" z3="-2.8535171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56014428" y3="-5.08672706" z3="-3.24618136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8595436" y3="-4.74057559" z3="-1.9308071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49245967" y3="-4.25553212" z3="-1.52625835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81137572" y3="-4.49721697" z3="-3.20141187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35959043" y3="-5.4002911" z3="-3.92172139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89581853" y3="-4.78287407" z3="-1.58626837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03252363" y3="-3.86352373" z3="0.23808554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17307986" y3="-3.64990447" z3="0.88233783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06077666" y3="-4.11197361" z3="0.44795962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16880604" y3="-3.51487416" z3="2.34933289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22827816" y3="-3.32912299" z3="5.14709977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36575799" y3="-3.71808003" z3="3.05195987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00145377" y3="-3.22512013" z3="3.07173781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02853573" y3="-3.13265289" z3="4.46022578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39454544" y3="-3.62748879" z3="4.4407789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28070368" y3="-3.9571107" z3="2.50320094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04135235" y3="-3.09299469" z3="2.5678057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09938491" y3="-2.9266083" z3="4.99902741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33301706" y3="-3.79754697" z3="4.97537482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24913532" y3="-3.26478692" z3="6.23855173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4125239" y3="-3.89006409" z3="-0.62234267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17255201" y3="-3.38766126" z3="-1.07498812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5222371" y3="0.24267997" z3="-4.71287997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07953057" y3="-1.72321334" z3="0.02339161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90604526" y3="-0.97234765" z3="1.18523489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84543983" y3="-0.32134922" z3="1.52054358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36851741" y3="0.54905048" z3="1.22325607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44750282" y3="1.45353519" z3="-0.40028908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98189154" y3="-0.70910115" z3="1.39568983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35074431" y3="1.73606813" z3="2.67232765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88259074" y3="-0.96263244" z3="2.08126899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65681841" y3="-0.347736" z3="3.33973087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20909501" y3="0.76567333" z3="-1.22953429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32671336" y3="2.24345706" z3="-0.39430007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42741373" y3="1.93745805" z3="-0.55877803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01273576" y3="-1.07593218" z3="2.43524658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95468446" y3="-0.24643357" z3="1.1564037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85552211" y3="-1.54923199" z3="0.69406623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40575638" y3="1.19299308" z3="3.63245678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58626674" y3="2.3220076" z3="2.67092609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19180962" y3="2.45056738" z3="2.62715213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79689827" y3="-0.80493702" z3="3.85498868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57368951" y3="-0.51982756" z3="3.91900555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48403552" y3="0.73432934" z3="3.21889752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84068888" y3="-0.70339356" z3="0.99026051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41856233" y3="-2.03174899" z3="0.8529744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7660681" y3="-2.67771259" z3="1.89575166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55237366" y3="-1.98229623" z3="3.08228306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02660635" y3="-0.68843688" z3="3.27601478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67928386" y3="-0.05603749" z3="2.22256666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52699815" y3="-2.53121885" z3="-0.11119859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37301819" y3="-3.68764916" z3="1.7734668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68939181" y3="-2.58181202" z3="4.10512157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84040721" y3="-0.17696518" z3="4.2209866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01940376" y3="0.97697737" z3="2.33713904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79425389" y3="0.46314001" z3="-4.28643752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77440454" y3="-0.50441805" z3="-4.46435395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42765241" y3="-1.69577639" z3="-5.09010361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1418269" y3="-1.92658982" z3="-5.56930061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83131899" y3="-0.95610267" z3="-5.3701541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0380705" y3="1.38623766" z3="-3.75469136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7926144" y3="-0.35855807" z3="-4.10242241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43998822" y3="-2.74433821" z3="-5.22998421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0879175" y3="-2.86667034" z3="-6.07151801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85272806" y3="-1.14189333" z3="-5.70629363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3543497" y3="-1.88612822" z3="5.04378042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31685742" y3="-3.72466389" z3="3.93862016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21792393" y3="-3.64523026" z3="-6.01063612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44114341" y3="-2.65935441" z3="-4.5470026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07259303" y3="1.16463802" z3="-1.49147492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11240585" y3="1.55269565" z3="-2.47083298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44135534" y3="1.49283071" z3="-1.68919561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85201653" y3="2.15750294" z3="-2.81875924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16717699" y3="1.1953376" z3="-0.92607632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90862741" y3="2.3996139" z3="-2.96265289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57322239" y3="2.22112842" z3="-3.63915827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90515769" y3="2.51543804" z3="-3.80816563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85245605" y3="2.49331466" z3="-4.41364162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23715354" y3="3.02440611" z3="-4.71791604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40378715" y3="3.1519426" z3="-3.3346924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28840643" y3="3.56343597" z3="-4.12236614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21127616" y3="4.1635021" z3="-2.74180257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96006034" y3="5.49632928" z3="-2.96628931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04000058" y3="3.87530183" z3="-2.09314989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59722345" y3="6.25196191" z3="-2.49879528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06325888" y3="4.94914319" z3="-4.34899094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88348205" y3="5.89871106" z3="-3.79181699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21180895" y3="5.24603309" z3="-4.96921561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69883366" y3="6.96192347" z3="-3.96983699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47748789" y3="-2.20008224" z3="-0.29807715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44710732" y3="-2.9914366" z3="-1.06620826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00743247" y3="-2.58318577" z3="0.58883966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09132931" y3="-1.3794437" z3="-0.71551352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17413002" y3="-1.42636495" z3="-1.14553025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31029077" y3="-0.3854372" z3="-1.49260879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.0980002" y3="-1.55172997" z3="-0.93950023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41398912" y3="-2.07989361" z3="-1.99786197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3407,.0527,-.1928;7.3869,.1704,.417;6.6478,.4443,-.3421;4.7295,1.237,-2.2631;4.3891,.4361,-1.1851;2.7303,.8451,-3.6632;3.6349,1.7484,-3.1364;1.3823,2.5894,-4.6174;1.5624,1.2484,-4.376;.5031,2.924,-5.1768;2.9266,-.485,-3.4416;3.0989,.047,-1.0021;2.4016,-1.097,-2.0012;.93,-.9652,-1.8291;3.1029,-2.4217,-1.8451;-.1436,-3.6216,.6775;-.0171,-5.2448,-4.7442;-.2452,-4.9912,-3.7053;-.8425,-4.3094,-1.0836;.7789,-4.5816,-2.8535;-1.5601,-5.0867,-3.2462;-1.8595,-4.7406,-1.9308;.4925,-4.2555,-1.5263;1.8114,-4.4972,-3.2014;-2.3596,-5.4003,-3.9217;-2.8958,-4.7829,-1.5863;-1.0325,-3.8635,.2381;-2.1731,-3.6499,.8823;-3.0608,-4.112,.448;-2.1688,-3.5149,2.3493;-2.2283,-3.3291,5.1471;-3.3658,-3.7181,3.052;-1.0015,-3.2251,3.0717;-1.0285,-3.1327,4.4602;-3.3945,-3.6275,4.4408;-4.2807,-3.9571,2.5032;-.0414,-3.093,2.5678;-.0994,-2.9266,4.999;-4.333,-3.7975,4.9754;-2.2491,-3.2648,6.2386;1.4125,-3.8901,-.6223;2.1726,-3.3877,-1.075;.5222,.2427,-4.7129;-3.0795,-1.7232,.0234;-2.906,-.9723,1.1852;-1.8454,-.3213,1.5205;-.3685,.5491,1.2233;-.4475,1.4535,-.4003;.9819,-.7091,1.3957;-.3507,1.7361,2.6723;-3.8826,-.9626,2.0813;-3.6568,-.3477,3.3397;-.2091,.7657,-1.2295;.3267,2.2435,-.3943;-1.4274,1.9375,-.5588;1.0127,-1.0759,2.4352;1.9547,-.2464,1.1564;.8555,-1.5492,.6941;-.4058,1.193,3.6325;.5863,2.322,2.6709;-1.1918,2.4506,2.6272;-2.7969,-.8049,3.855;-4.5737,-.5198,3.919;-3.484,.7343,3.2189;4.8407,-.7034,.9903;4.4186,-2.0317,.853;3.7661,-2.6777,1.8958;3.5524,-1.9823,3.0823;4.0266,-.6884,3.276;4.6793,-.056,2.2226;4.527,-2.5312,-.1112;3.373,-3.6876,1.7735;2.6894,-2.5818,4.1051;3.8404,-.177,4.221;5.0194,.977,2.3371;-.7943,.4631,-4.2864;-1.7744,-.5044,-4.4644;-1.4277,-1.6958,-5.0901;-.1418,-1.9266,-5.5693;.8313,-.9561,-5.3702;-1.0381,1.3862,-3.7547;-2.7926,-.3586,-4.1024;-2.44,-2.7443,-5.23;.0879,-2.8667,-6.0715;1.8527,-1.1419,-5.7063;2.3543,-1.8861,5.0438;2.3169,-3.7247,3.9386;-2.2179,-3.6452,-6.0106;-3.4411,-2.6594,-4.547;7.0726,1.1646,-1.4915;6.1124,1.5527,-2.4708;8.4414,1.4928,-1.6892;8.852,2.1575,-2.8188;9.1672,1.1953,-.9261;9.9086,2.3996,-2.9627;6.5732,2.2211,-3.6392;7.9052,2.5154,-3.8082;5.8525,2.4933,-4.4136;8.2372,3.0244,-4.7179;3.4038,3.1519,-3.3347;2.2884,3.5634,-4.1224;4.2113,4.1635,-2.7418;3.9601,5.4963,-2.9663;5.04,3.8753,-2.0931;4.5972,6.252,-2.4988;2.0633,4.9491,-4.349;2.8835,5.8987,-3.7918;1.2118,5.246,-4.9692;2.6988,6.9619,-3.9698;-4.4775,-2.2001,-.2981;-4.4471,-2.9914,-1.0662;-5.0074,-2.5832,.5888;-5.0913,-1.3794,-.7155;-2.1741,-1.4264,-1.1455;-2.3103,-.3854,-1.4926;-1.098,-1.5517,-.9395;-2.414,-2.0799,-1.9979;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650426021550</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000991581144 0.000187119313 0.021862400384 0.005357663995</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030752241 -0.000085197 -0.000024351 0.000169967 0.000257186 0.000281118 0.000390848 0.000395302 0.000588081 0.000830618 0.000879360 0.000980141 0.001190229 0.001237377 0.001415655 0.001489127 0.001543620 0.001723567 0.001776537 0.001913999 0.002000902 0.002260876 0.002395663 0.002516156 0.002677215 0.003023680 0.003062862 0.003127348 0.003565581 0.003852214 0.004425686 0.004666774 0.004775058 0.005105997 0.006010133 0.006111382 0.006297832 0.006667293 0.006881467 0.007589733 0.007993201 0.008215282 0.008411485 0.009431408 0.009603658 0.010061605 0.010114316 0.011160891 0.011909654 0.012209666 0.013006564 0.013151593 0.014367411 0.014874301 0.015408257 0.015826873 0.015998478 0.016601714 0.016782532 0.017533044 0.018261005 0.018824993 0.019362032 0.019640909 0.020204582 0.020733630 0.021247160 0.021411599 0.022189587 0.023100251 0.023741070 0.026487443 0.026894310 0.027984943 0.028247606 0.029594031 0.030518611 0.031631028 0.033247263 0.033732027 0.034165451 0.035777866 0.037179647 0.037418674 0.039456761 0.039952255 0.040218614 0.041104664 0.042595722 0.044728438 0.045705357 0.047161076 0.048038608 0.049284655 0.050514689 0.051089271 0.051310010 0.051771546 0.052493966 0.052813202 0.052960887 0.053261731 0.054852512 0.054991344 0.056191775 0.056375947 0.056592156 0.057065701 0.057242787 0.059218391 0.060655624 0.061075917 0.061859514 0.062418139 0.063432347 0.064540677 0.065323537 0.066096827 0.066619724 0.068456969 0.069281308 0.070289189 0.072802323 0.074501693 0.074806074 0.076536515 0.079193464 0.084562227 0.086962146 0.087197176 0.087711789 0.089756779 0.090709268 0.091560028 0.094299168 0.095075092 0.095908454 0.096505838 0.097869566 0.098855798 0.100237462 0.100847832 0.102446602 0.103223884 0.103658371 0.104334209 0.104605649 0.105151852 0.106372911 0.107090508 0.108255972 0.110084936 0.111210667 0.112508188 0.113577789 0.115105584 0.116293634 0.116868458 0.118774950 0.121376070 0.122549036 0.123815721 0.125396508 0.126259852 0.126418816 0.126797035 0.127822740 0.132170920 0.135113737 0.135889443 0.143178417 0.144063930 0.147094880 0.147674957 0.149791773 0.151857632 0.154684657 0.155016440 0.156733121 0.161353821 0.162013923 0.173830108 0.174474833 0.182043447 0.185467539 0.186586443 0.189687263 0.190445433 0.194482685 0.195802110 0.198971853 0.200391842 0.205239788 0.207193226 0.207484623 0.210293109 0.216831189 0.217360875 0.217976031 0.220096547 0.220891765 0.225430295 0.226767270 0.232423117 0.235214080 0.235744328 0.236116990 0.244754076 0.256138921 0.257365213 0.264013065 0.269984083 0.280790884 0.283822167 0.286394543 0.291985580 0.297050319 0.304544924 0.306038596 0.307327822 0.314572518 0.316834678 0.317458126 0.322270711 0.330192575 0.332946759 0.351845938 0.353047030 0.355354432 0.355992492 0.360096331 0.363094928 0.364614291 0.384204438 0.386034625 0.392253024 0.410583705 0.426117168 0.431293351 0.462511414 0.469431118 0.479169261 0.484613552 0.484642895 0.487584645 0.491497762 0.509729054 0.515602669 0.535424487 0.569398109 0.575413511 0.591548740 0.594267845 0.607416682 0.608442545 0.645040269 0.647969129 0.649825692 0.674473859 0.678487088 0.688222685 0.693491958 0.694078582 0.700367151 0.704856544 0.718503357 0.742285653 0.751448106 0.759465999 0.772147864 0.774762709 0.779751100 0.811035025 0.816572268 0.820205789 0.823142206 0.823755250 0.832339609 0.835080182 0.838113890 0.842706358 0.845963033 0.847739285 0.850240998 0.859818456 0.865961665 0.869082064 0.874724876 0.886441857 0.888693172 0.889872971 0.900837719 0.901109927 0.904210609 0.924182310 0.928264039 0.936656565 0.938190494 0.966396075 0.977364103 0.987416607 1.001831445 1.020388849 1.028845967 1.042635929 1.052742742 1.058819428 1.069253249 1.087012718 1.089023608 1.105264459 1.111882705 1.112901064 1.128119836 1.136517590 1.141245561 1.145470575 1.176819332 1.179210267 1.181859076 1.187625418 1.191671633 1.198551909 1.224772692 1.229058722 1.274820710 1.303091446 1.321428102 1.328478153 1.333424645 1.336712653 1.338183547 1.342354402 1.344594401 1.345316556 1.359925703 1.379712506 1.383509015 1.386161609 1.409128306 1.421053389 1.431527685 1.551518546 1.686629252 1.776678472</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">311</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34048817" y3="0.04753255" z3="-0.19259701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38669525" y3="0.16339169" z3="0.41565006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64698904" y3="0.43803676" z3="-0.34265903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72757881" y3="1.2345822" z3="-2.26084896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3882539" y3="0.43187435" z3="-1.18411597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72797397" y3="0.84385813" z3="-3.66065613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63210367" y3="1.74671935" z3="-3.13270612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37730452" y3="2.58861295" z3="-4.60983847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55909933" y3="1.2474019" z3="-4.37172839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.4972761" y3="2.92394234" z3="-5.16739389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92603384" y3="-0.486448" z3="-3.44178577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09838582" y3="0.04123458" z3="-1.00172412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40212578" y3="-1.10181967" z3="-2.00248227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93045192" y3="-0.97225292" z3="-1.82961008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10489533" y3="-2.42607434" z3="-1.84901967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14281288" y3="-3.6124577" z3="0.67261314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01319549" y3="-5.25678861" z3="-4.74209938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2420335" y3="-4.99880439" z3="-3.70457421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84034001" y3="-4.30774724" z3="-1.08550637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78244387" y3="-4.58995484" z3="-2.85271123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55819986" y3="-5.08838529" z3="-3.24679661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85820971" y3="-4.73762893" z3="-1.93293404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49521374" y3="-4.25914099" z3="-1.52690158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81520929" y3="-4.50904672" z3="-3.19934357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35632146" y3="-5.40328426" z3="-3.922039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89464534" y3="-4.77638284" z3="-1.58966579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03026072" y3="-3.85878021" z3="0.23506116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17080313" y3="-3.64603156" z3="0.87982076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05832232" y3="-4.10918234" z3="0.44611185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16619393" y3="-3.51051908" z3="2.34681926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.225154" y3="-3.32638016" z3="5.14469501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36249976" y3="-3.715651" z3="3.04968842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99932764" y3="-3.21919586" z3="3.06895873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02604571" y3="-3.12777989" z3="4.45759657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39112673" y3="-3.62569824" z3="4.43854944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27740863" y3="-3.95534693" z3="2.50098047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03972626" y3="-3.08528052" z3="2.56482379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09689569" y3="-2.92154668" z3="4.99658521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32960556" y3="-3.79658456" z3="4.97331673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24555154" y3="-3.26302708" z3="6.23626131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41502461" y3="-3.89335998" z3="-0.62323085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17469633" y3="-3.3918789" z3="-1.07668848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52010534" y3="0.24128004" z3="-4.71059567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08074461" y3="-1.72016926" z3="0.02200839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90343155" y3="-0.96828984" z3="1.18269524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84126001" y3="-0.31743158" z3="1.51362956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36635254" y3="0.55567006" z3="1.21509271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4438229" y3="1.45312273" z3="-0.41244316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98531998" y3="-0.70036073" z3="1.39693571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35382755" y3="1.7509489" z3="2.65755982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87677907" y3="-0.95763023" z3="2.08238157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64517546" y3="-0.34381966" z3="3.34061754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20816111" y3="0.76153418" z3="-1.2394867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3326115" y3="2.24088589" z3="-0.40942327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42263578" y3="1.93941989" z3="-0.57223223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01365102" y3="-1.06238056" z3="2.43796721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95808385" y3="-0.23818517" z3="1.15776015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86044234" y3="-1.54386608" z3="0.69852528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41196682" y3="1.21376749" z3="3.62086325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58348779" y3="2.33686646" z3="2.65546609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19473786" y3="2.46532283" z3="2.60528972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78279394" y3="-0.80102572" z3="3.85165515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55917124" y3="-0.51651149" z3="3.92428179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47335643" y3="0.73802987" z3="3.21979896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84125159" y3="-0.70951381" z3="0.99026041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4148972" y3="-2.03647203" z3="0.85172436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76169188" y3="-2.68195262" z3="1.89432465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55208195" y3="-1.98765916" z3="3.0821333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03149778" y3="-0.69572645" z3="3.27758686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68408548" y3="-0.0636411" z3="2.22385357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51997516" y3="-2.53483298" z3="-0.1136282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36455965" y3="-3.69044519" z3="1.7705831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68955106" y3="-2.5863503" z3="4.10581664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84900323" y3="-0.18526669" z3="4.22386829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0270816" y3="0.96815621" z3="2.33897721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79774743" y3="0.46116351" z3="-4.28786288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77693685" y3="-0.50690272" z3="-4.46651017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42766281" y3="-1.69869372" z3="-5.09152439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14051407" y3="-1.92905827" z3="-5.56735864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83157471" y3="-0.95774383" z3="-5.36603589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0438019" y3="1.38453169" z3="-3.75673477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79630359" y3="-0.36120126" z3="-4.10825166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43891514" y3="-2.7486502" z3="-5.23315416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09054204" y3="-2.86941252" z3="-6.06747231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85388369" y3="-1.14322146" z3="-5.69970558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36145981" y3="-1.89223956" z3="5.04857015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3114403" y3="-3.72693237" z3="3.93700519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21430143" y3="-3.64997581" z3="-6.01209756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4420147" y3="-2.66432328" z3="-4.55250349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07105727" y3="1.16159192" z3="-1.49059615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11032004" y3="1.55207257" z3="-2.46840636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43992664" y3="1.49204069" z3="-1.68795621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84969564" y3="2.15901338" z3="-2.81633537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1663323" y3="1.19328418" z3="-0.92584637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90623085" y3="2.40220054" z3="-2.96014055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57038345" y3="2.22378432" z3="-3.63537848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90186954" y3="2.51786007" z3="-3.80464684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84891756" y3="2.49666249" z3="-4.4090694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23307416" y3="3.02710201" z3="-4.7138023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3992801" y3="3.15048787" z3="-3.32770578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28261055" y3="3.56254622" z3="-4.11322191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20600603" y3="4.16180929" z3="-2.73319838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95313755" y3="5.49459804" z3="-2.95463324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03570307" y3="3.87323966" z3="-2.08598924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58903693" y3="6.25082701" z3="-2.48484776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05518531" y3="4.94871041" z3="-4.33594082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87490562" y3="5.89787929" z3="-3.77760714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20255739" y3="5.24611548" z3="-4.95428353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68906522" y3="6.96106324" z3="-3.95315529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4795712" y3="-2.19764636" z3="-0.29477308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45123496" y3="-2.99117509" z3="-1.06082404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00747047" y3="-2.57839476" z3="0.59430484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09430122" y3="-1.37807094" z3="-0.71304439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17838125" y3="-1.4247425" z3="-1.14956354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31545564" y3="-0.38427606" z3="-1.49787532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10175728" y3="-1.54982754" z3="-0.94545236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41988743" y3="-2.07963008" z3="-2.00013631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3405,.0475,-.1926;7.3867,.1634,.4157;6.647,.438,-.3427;4.7276,1.2346,-2.2608;4.3883,.4319,-1.1841;2.728,.8439,-3.6607;3.6321,1.7467,-3.1327;1.3773,2.5886,-4.6098;1.5591,1.2474,-4.3717;.4973,2.9239,-5.1674;2.926,-.4864,-3.4418;3.0984,.0412,-1.0017;2.4021,-1.1018,-2.0025;.9305,-.9723,-1.8296;3.1049,-2.4261,-1.849;-.1428,-3.6125,.6726;-.0132,-5.2568,-4.7421;-.242,-4.9988,-3.7046;-.8403,-4.3077,-1.0855;.7824,-4.59,-2.8527;-1.5582,-5.0884,-3.2468;-1.8582,-4.7376,-1.9329;.4952,-4.2591,-1.5269;1.8152,-4.509,-3.1993;-2.3563,-5.4033,-3.922;-2.8946,-4.7764,-1.5897;-1.0303,-3.8588,.2351;-2.1708,-3.646,.8798;-3.0583,-4.1092,.4461;-2.1662,-3.5105,2.3468;-2.2252,-3.3264,5.1447;-3.3625,-3.7157,3.0497;-.9993,-3.2192,3.069;-1.026,-3.1278,4.4576;-3.3911,-3.6257,4.4385;-4.2774,-3.9553,2.501;-.0397,-3.0853,2.5648;-.0969,-2.9215,4.9966;-4.3296,-3.7966,4.9733;-2.2456,-3.263,6.2363;1.415,-3.8934,-.6232;2.1747,-3.3919,-1.0767;.5201,.2413,-4.7106;-3.0807,-1.7202,.022;-2.9034,-.9683,1.1827;-1.8413,-.3174,1.5136;-.3664,.5557,1.2151;-.4438,1.4531,-.4124;.9853,-.7004,1.3969;-.3538,1.7509,2.6576;-3.8768,-.9576,2.0824;-3.6452,-.3438,3.3406;-.2082,.7615,-1.2395;.3326,2.2409,-.4094;-1.4226,1.9394,-.5722;1.0137,-1.0624,2.438;1.9581,-.2382,1.1578;.8604,-1.5439,.6985;-.412,1.2138,3.6209;.5835,2.3369,2.6555;-1.1947,2.4653,2.6053;-2.7828,-.801,3.8517;-4.5592,-.5165,3.9243;-3.4734,.738,3.2198;4.8413,-.7095,.9903;4.4149,-2.0365,.8517;3.7617,-2.682,1.8943;3.5521,-1.9877,3.0821;4.0315,-.6957,3.2776;4.6841,-.0636,2.2239;4.52,-2.5348,-.1136;3.3646,-3.6904,1.7706;2.6896,-2.5864,4.1058;3.849,-.1853,4.2239;5.0271,.9682,2.339;-.7977,.4612,-4.2879;-1.7769,-.5069,-4.4665;-1.4277,-1.6987,-5.0915;-.1405,-1.9291,-5.5674;.8316,-.9577,-5.366;-1.0438,1.3845,-3.7567;-2.7963,-.3612,-4.1083;-2.4389,-2.7487,-5.2332;.0905,-2.8694,-6.0675;1.8539,-1.1432,-5.6997;2.3615,-1.8922,5.0486;2.3114,-3.7269,3.937;-2.2143,-3.65,-6.0121;-3.442,-2.6643,-4.5525;7.0711,1.1616,-1.4906;6.1103,1.5521,-2.4684;8.4399,1.492,-1.688;8.8497,2.159,-2.8163;9.1663,1.1933,-.9258;9.9062,2.4022,-2.9601;6.5704,2.2238,-3.6354;7.9019,2.5179,-3.8046;5.8489,2.4967,-4.4091;8.2331,3.0271,-4.7138;3.3993,3.1505,-3.3277;2.2826,3.5625,-4.1132;4.206,4.1618,-2.7332;3.9531,5.4946,-2.9546;5.0357,3.8732,-2.086;4.589,6.2508,-2.4848;2.0552,4.9487,-4.3359;2.8749,5.8979,-3.7776;1.2026,5.2461,-4.9543;2.6891,6.9611,-3.9532;-4.4796,-2.1976,-.2948;-4.4512,-2.9912,-1.0608;-5.0075,-2.5784,.5943;-5.0943,-1.3781,-.713;-2.1784,-1.4247,-1.1496;-2.3155,-.3843,-1.4979;-1.1018,-1.5498,-.9455;-2.4199,-2.0796,-2.0001;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650426783450</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000880126875 0.000156261537 0.024094596153 0.005318870854</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030754013 -0.000171310 -0.000000102 0.000083794 0.000256832 0.000283316 0.000387327 0.000406615 0.000587439 0.000832016 0.000879069 0.000980953 0.001200165 0.001252101 0.001416080 0.001494206 0.001545245 0.001713923 0.001776973 0.001913915 0.001991882 0.002260227 0.002393272 0.002518652 0.002678812 0.003021365 0.003060182 0.003127328 0.003567190 0.003851774 0.004420660 0.004667779 0.004775801 0.005103620 0.006010402 0.006114695 0.006296038 0.006669410 0.006874026 0.007579397 0.007989925 0.008216560 0.008413350 0.009434021 0.009601066 0.010057991 0.010113787 0.011160361 0.011909698 0.012217123 0.013005143 0.013151929 0.014368589 0.014881070 0.015410275 0.015827389 0.015999552 0.016602590 0.016783057 0.017538692 0.018260852 0.018827171 0.019361389 0.019640334 0.020204214 0.020733245 0.021247525 0.021409256 0.022184635 0.023101846 0.023737993 0.026486981 0.026894208 0.027998440 0.028251270 0.029594248 0.030520061 0.031631903 0.033247454 0.033732776 0.034165561 0.035778619 0.037181635 0.037417156 0.039456831 0.039949811 0.040214649 0.041105003 0.042595022 0.044728582 0.045711138 0.047161215 0.048039038 0.049284984 0.050515278 0.051089495 0.051311910 0.051772567 0.052493965 0.052813376 0.052961511 0.053264692 0.054854963 0.054991282 0.056202714 0.056380941 0.056592299 0.057066538 0.057243020 0.059219161 0.060655698 0.061076808 0.061862945 0.062417965 0.063433151 0.064541123 0.065323797 0.066101976 0.066620203 0.068464984 0.069282753 0.070289159 0.072802890 0.074509593 0.074805991 0.076536508 0.079200800 0.084562779 0.086962622 0.087202061 0.087717932 0.089760234 0.090710277 0.091562597 0.094300922 0.095076049 0.095909888 0.096506002 0.097870251 0.098856795 0.100237739 0.100849821 0.102446973 0.103224475 0.103658361 0.104345269 0.104605912 0.105174123 0.106373738 0.107091359 0.108256663 0.110087147 0.111213749 0.112511166 0.113577809 0.115109564 0.116294111 0.116868759 0.118776053 0.121378994 0.122549537 0.123823829 0.125418030 0.126261882 0.126420288 0.126797272 0.127833535 0.132174570 0.135119461 0.135894210 0.143177906 0.144067110 0.147095459 0.147675696 0.149794664 0.151869363 0.154685650 0.155017086 0.156735065 0.161353348 0.162015009 0.173829982 0.174476873 0.182064388 0.185490134 0.186586994 0.189690958 0.190445767 0.194486544 0.195810842 0.198971682 0.200399649 0.205243046 0.207193878 0.207491387 0.210293531 0.216831952 0.217375330 0.217978801 0.220136944 0.220892730 0.225432338 0.226769085 0.232423416 0.235214316 0.235745986 0.236119347 0.244755903 0.256140209 0.257367738 0.264015449 0.269984212 0.280791740 0.283831178 0.286395903 0.291987756 0.297051973 0.304549377 0.306039986 0.307328640 0.314579338 0.316834753 0.317458119 0.322270761 0.330193456 0.332952889 0.351847229 0.353047990 0.355361917 0.355993303 0.360098673 0.363095321 0.364618001 0.384205626 0.386038128 0.392252542 0.410584070 0.426117674 0.431294753 0.462512677 0.469439867 0.479174098 0.484617150 0.484644428 0.487588644 0.491498406 0.509735543 0.515603873 0.535424589 0.569401088 0.575414690 0.591551608 0.594269712 0.607418876 0.608448458 0.645040326 0.647971144 0.649834750 0.674476985 0.678488696 0.688228237 0.693497309 0.694090336 0.700376189 0.704859335 0.718508836 0.742287732 0.751449234 0.759466861 0.772156248 0.774784132 0.779752003 0.811036653 0.816578614 0.820206181 0.823143701 0.823758946 0.832349572 0.835083650 0.838125032 0.842712510 0.845963518 0.847744087 0.850244960 0.859826635 0.865962485 0.869096394 0.874724957 0.886454406 0.888734984 0.889876839 0.900849087 0.901110726 0.904211365 0.924191269 0.928270970 0.936659021 0.938196813 0.966399756 0.977375071 0.987422718 1.001837277 1.020389178 1.028846166 1.042646636 1.052754530 1.058840296 1.069255552 1.087014397 1.089033666 1.105275301 1.111887760 1.112911507 1.128192794 1.136520076 1.141257648 1.145487920 1.176822924 1.179211141 1.181859228 1.187632130 1.191671768 1.198562107 1.224774275 1.229066682 1.274839153 1.303092124 1.321428402 1.328479852 1.333433586 1.336713316 1.338187613 1.342359826 1.344623277 1.345330500 1.359931458 1.379716413 1.383510473 1.386166402 1.409167215 1.421077816 1.431532794 1.551519118 1.686644879 1.776709384</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">312</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33884474" y3="0.04340094" z3="-0.19178561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38394873" y3="0.16498644" z3="0.42087581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64510601" y3="0.43870997" z3="-0.33856257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72699489" y3="1.23178927" z3="-2.25957678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38737355" y3="0.42687358" z3="-1.18442231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72807097" y3="0.84206718" z3="-3.66127027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63177968" y3="1.74449084" z3="-3.13139096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37813886" y3="2.58807238" z3="-4.60948994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55962868" y3="1.24650293" z3="-4.37256713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49870778" y3="2.92365271" z3="-5.16792987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92614836" y3="-0.48872374" z3="-3.44483326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09774418" y3="0.03445438" z3="-1.00374926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40259909" y3="-1.10736354" z3="-2.00675515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9308172" y3="-0.97959257" z3="-1.83318571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10656313" y3="-2.43129785" z3="-1.85599353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13841257" y3="-3.61217964" z3="0.6717397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02053882" y3="-5.25649229" z3="-4.74367645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24715526" y3="-4.99862224" z3="-3.70562505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84060876" y3="-4.30597781" z3="-1.08577002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77912954" y3="-4.59168345" z3="-2.85506191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56252564" y3="-5.08628498" z3="-3.2460087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86001365" y3="-4.73461333" z3="-1.93172942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4945165" y3="-4.26025564" z3="-1.5287837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81192057" y3="-4.51342272" z3="-3.20315824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36350782" y3="-5.39804789" z3="-3.9204631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89648868" y3="-4.77035349" z3="-1.58721368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02826744" y3="-3.85560491" z3="0.23469381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16767982" y3="-3.64486607" z3="0.88157347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05492714" y3="-4.10961745" z3="0.44919695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.1612491" y3="-3.50901649" z3="2.34843964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21670574" y3="-3.32554727" z3="5.14642981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35638743" y3="-3.71640587" z3="3.05291242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99364699" y3="-3.21556889" z3="3.0690311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01880079" y3="-3.12454161" z3="4.45769755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38320437" y3="-3.62686269" z3="4.44184314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27155911" y3="-3.95808852" z3="2.50550133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03496689" y3="-3.07952238" z3="2.56330937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08955239" y3="-2.91670746" z3="4.99572337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32012987" y3="-3.80054422" z3="4.97782204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23571624" y3="-3.26246919" z3="6.23799907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41700224" y3="-3.89679242" z3="-0.62632418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17728377" y3="-3.39710712" z3="-1.08133246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52047982" y3="0.24073124" z3="-4.71256028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.082114" y3="-1.72056209" z3="0.02377893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90231888" y3="-0.9682353" z3="1.18349682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8399738" y3="-0.31605173" z3="1.51076291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36911771" y3="0.5622843" z3="1.20784909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44704353" y3="1.44917431" z3="-0.42559509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9862754" y3="-0.68839121" z3="1.39856253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36373903" y3="1.76779698" z3="2.64208755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87290111" y3="-0.95854356" z3="2.08591817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63883125" y3="-0.34395366" z3="3.34278014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20767204" y3="0.75310977" z3="-1.24763293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32696394" y3="2.23945814" z3="-0.42707916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42692062" y3="1.93118721" z3="-0.58979506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01310352" y3="-1.04749276" z3="2.44114367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95919622" y3="-0.22558001" z3="1.15986598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86459696" y3="-1.53470858" z3="0.70310977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42006207" y3="1.23786208" z3="3.60946278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56997464" y3="2.35904785" z3="2.63645897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20833191" y3="2.47726892" z3="2.58350536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77638544" y3="-0.80234439" z3="3.85264195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55225316" y3="-0.51512098" z3="3.92758691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.46526494" y3="0.73806597" z3="3.22109443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83941998" y3="-0.7149801" z3="0.98990654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40760357" y3="-2.03989193" z3="0.84846093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75521217" y3="-2.68614725" z3="1.89106252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55162788" y3="-1.99466546" z3="3.08171843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03598986" y3="-0.70510969" z3="3.27946046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68833462" y3="-0.07229256" z3="2.22602329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50901305" y3="-2.53585169" z3="-0.11827193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35516189" y3="-3.69299507" z3="1.76598493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69092459" y3="-2.59388054" z3="4.10654474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85809114" y3="-0.19691473" z3="4.22780576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03630143" y3="0.9578348" z3="2.34397534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79675406" y3="0.4601812" z3="-4.28798673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77590807" y3="-0.50804136" z3="-4.46781651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42746743" y3="-1.69900571" z3="-5.09306931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14096483" y3="-1.92861857" z3="-5.57099471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83110635" y3="-0.9573707" z3="-5.37038222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04192326" y3="1.38280623" z3="-3.75630306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79469999" y3="-0.36298056" z3="-4.10720409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4386536" y3="-2.7483733" z3="-5.23405952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09043439" y3="-2.86834172" z3="-6.07340371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85297409" y3="-1.14231798" z3="-5.70540704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36492418" y3="-1.90054367" z3="5.05011274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31147448" y3="-3.73405456" z3="3.93718809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21465082" y3="-3.64948961" z3="-6.01385028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44082853" y3="-2.66377982" z3="-4.55270791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06950726" y3="1.16291852" z3="-1.48550757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10945961" y3="1.55122576" z3="-2.46494813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.4376591" y3="1.49540893" z3="-1.68031505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84802566" y3="2.16472302" z3="-2.80721158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16326192" y3="1.19765523" z3="-0.91704746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90410504" y3="2.41014574" z3="-2.94882959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5700736" y3="2.22430863" z3="-3.63063562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90145664" y3="2.52295814" z3="-3.79683088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8495851" y3="2.49689017" z3="-4.40526388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23330852" y3="3.03588523" z3="-4.70448914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39902482" y3="3.14849233" z3="-3.32485792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28326532" y3="3.56139184" z3="-4.11124423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20531582" y3="4.15895552" z3="-2.7284987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95285042" y3="5.49220769" z3="-2.94877107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03414492" y3="3.8695939" z3="-2.08055284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58918267" y3="6.24698524" z3="-2.47868751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05673848" y3="4.94758555" z3="-4.33338091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87602637" y3="5.89617564" z3="-3.77317161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20508264" y3="5.24562486" z3="-4.95273716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69048175" y3="6.95974016" z3="-3.94790928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48113891" y3="-2.19992429" z3="-0.28866028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45438085" y3="-2.99401824" z3="-1.054146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00583136" y3="-2.58055467" z3="0.60233158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0981348" y3="-1.38133054" z3="-0.70557717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18294337" y3="-1.42499684" z3="-1.15017051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32123284" y3="-0.38470195" z3="-1.49778976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10564703" y3="-1.55025179" z3="-0.94903136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4272612" y3="-2.07943225" z3="-2.00046506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3388,.0434,-.1918;7.3839,.165,.4209;6.6451,.4387,-.3386;4.727,1.2318,-2.2596;4.3874,.4269,-1.1844;2.7281,.8421,-3.6613;3.6318,1.7445,-3.1314;1.3781,2.5881,-4.6095;1.5596,1.2465,-4.3726;.4987,2.9237,-5.1679;2.9261,-.4887,-3.4448;3.0977,.0345,-1.0037;2.4026,-1.1074,-2.0068;.9308,-.9796,-1.8332;3.1066,-2.4313,-1.856;-.1384,-3.6122,.6717;-.0205,-5.2565,-4.7437;-.2472,-4.9986,-3.7056;-.8406,-4.306,-1.0858;.7791,-4.5917,-2.8551;-1.5625,-5.0863,-3.246;-1.86,-4.7346,-1.9317;.4945,-4.2603,-1.5288;1.8119,-4.5134,-3.2032;-2.3635,-5.398,-3.9205;-2.8965,-4.7704,-1.5872;-1.0283,-3.8556,.2347;-2.1677,-3.6449,.8816;-3.0549,-4.1096,.4492;-2.1612,-3.509,2.3484;-2.2167,-3.3255,5.1464;-3.3564,-3.7164,3.0529;-.9936,-3.2156,3.069;-1.0188,-3.1245,4.4577;-3.3832,-3.6269,4.4418;-4.2716,-3.9581,2.5055;-.035,-3.0795,2.5633;-.0896,-2.9167,4.9957;-4.3201,-3.8005,4.9778;-2.2357,-3.2625,6.238;1.417,-3.8968,-.6263;2.1773,-3.3971,-1.0813;.5205,.2407,-4.7126;-3.0821,-1.7206,.0238;-2.9023,-.9682,1.1835;-1.84,-.3161,1.5108;-.3691,.5623,1.2078;-.447,1.4492,-.4256;.9863,-.6884,1.3986;-.3637,1.7678,2.6421;-3.8729,-.9585,2.0859;-3.6388,-.344,3.3428;-.2077,.7531,-1.2476;.327,2.2395,-.4271;-1.4269,1.9312,-.5898;1.0131,-1.0475,2.4411;1.9592,-.2256,1.1599;.8646,-1.5347,.7031;-.4201,1.2379,3.6095;.57,2.359,2.6365;-1.2083,2.4773,2.5835;-2.7764,-.8023,3.8526;-4.5523,-.5151,3.9276;-3.4653,.7381,3.2211;4.8394,-.715,.9899;4.4076,-2.0399,.8485;3.7552,-2.6861,1.8911;3.5516,-1.9947,3.0817;4.036,-.7051,3.2795;4.6883,-.0723,2.226;4.509,-2.5359,-.1183;3.3552,-3.693,1.766;2.6909,-2.5939,4.1065;3.8581,-.1969,4.2278;5.0363,.9578,2.344;-.7968,.4602,-4.288;-1.7759,-.508,-4.4678;-1.4275,-1.699,-5.0931;-.141,-1.9286,-5.571;.8311,-.9574,-5.3704;-1.0419,1.3828,-3.7563;-2.7947,-.363,-4.1072;-2.4387,-2.7484,-5.2341;.0904,-2.8683,-6.0734;1.853,-1.1423,-5.7054;2.3649,-1.9005,5.0501;2.3115,-3.7341,3.9372;-2.2147,-3.6495,-6.0139;-3.4408,-2.6638,-4.5527;7.0695,1.1629,-1.4855;6.1095,1.5512,-2.4649;8.4377,1.4954,-1.6803;8.848,2.1647,-2.8072;9.1633,1.1977,-.917;9.9041,2.4101,-2.9488;6.5701,2.2243,-3.6306;7.9015,2.523,-3.7968;5.8496,2.4969,-4.4053;8.2333,3.0359,-4.7045;3.399,3.1485,-3.3249;2.2833,3.5614,-4.1112;4.2053,4.159,-2.7285;3.9529,5.4922,-2.9488;5.0341,3.8696,-2.0806;4.5892,6.247,-2.4787;2.0567,4.9476,-4.3334;2.876,5.8962,-3.7732;1.2051,5.2456,-4.9527;2.6905,6.9597,-3.9479;-4.4811,-2.1999,-.2887;-4.4544,-2.994,-1.0541;-5.0058,-2.5806,.6023;-5.0981,-1.3813,-.7056;-2.1829,-1.425,-1.1502;-2.3212,-.3847,-1.4978;-1.1056,-1.5503,-.949;-2.4273,-2.0794,-2.0005;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422513680</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001095100483 0.000202488408 0.019698003831 0.005348233613</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030759922 -0.000359420 0.000080397 0.000101227 0.000245961 0.000266859 0.000371182 0.000483947 0.000583327 0.000827702 0.000880753 0.000958788 0.001201409 0.001247015 0.001413263 0.001514314 0.001550847 0.001715822 0.001786824 0.001913608 0.001980004 0.002256069 0.002395516 0.002528752 0.002674640 0.003027170 0.003049954 0.003120247 0.003566952 0.003844893 0.004411137 0.004671117 0.004776182 0.005096202 0.006003086 0.006115737 0.006297418 0.006670297 0.006878514 0.007580096 0.007985307 0.008217980 0.008420229 0.009428713 0.009587812 0.010060949 0.010113063 0.011160393 0.011907419 0.012224280 0.013003159 0.013152187 0.014370942 0.014882306 0.015402950 0.015820795 0.016001218 0.016591051 0.016780224 0.017514913 0.018262864 0.018831668 0.019341976 0.019640838 0.020202251 0.020728985 0.021247280 0.021406882 0.022144099 0.023089730 0.023721817 0.026491762 0.026893942 0.028020654 0.028254912 0.029595348 0.030523279 0.031634588 0.033247670 0.033733793 0.034163714 0.035773364 0.037182132 0.037406654 0.039436982 0.039893096 0.040208502 0.041109251 0.042594347 0.044727643 0.045720569 0.047163354 0.048039593 0.049285378 0.050515187 0.051089250 0.051311584 0.051768972 0.052493933 0.052813032 0.052962020 0.053265751 0.054855399 0.054991365 0.056218420 0.056390723 0.056592918 0.057067865 0.057242433 0.059220808 0.060656023 0.061074733 0.061870109 0.062417986 0.063435142 0.064541272 0.065324064 0.066103733 0.066619832 0.068486106 0.069284175 0.070289889 0.072803370 0.074491938 0.074805498 0.076537047 0.079211355 0.084565619 0.086967122 0.087209887 0.087726702 0.089766687 0.090710137 0.091566271 0.094306192 0.095077702 0.095913225 0.096505889 0.097871358 0.098856737 0.100237605 0.100851598 0.102445931 0.103227148 0.103658244 0.104343079 0.104601019 0.105190818 0.106375210 0.107090690 0.108248087 0.110090325 0.111216588 0.112514450 0.113572538 0.115125058 0.116293779 0.116869604 0.118776237 0.121379208 0.122549625 0.123826235 0.125446477 0.126264552 0.126420404 0.126801251 0.127842998 0.132179903 0.135119402 0.135906049 0.143176462 0.144072085 0.147096558 0.147659972 0.149783110 0.151825921 0.154688096 0.155011858 0.156736181 0.161353910 0.162014242 0.173829571 0.174478678 0.182087697 0.185515150 0.186587928 0.189693667 0.190446386 0.194493822 0.195820507 0.198972544 0.200407367 0.205250806 0.207196261 0.207495230 0.210295150 0.216836708 0.217383672 0.217985268 0.220168691 0.220894159 0.225433922 0.226770630 0.232424033 0.235214140 0.235748243 0.236120402 0.244759311 0.256140415 0.257372119 0.264014434 0.269982834 0.280791466 0.283842279 0.286396960 0.291988112 0.297053769 0.304558674 0.306039330 0.307333152 0.314599516 0.316835546 0.317457825 0.322270780 0.330194223 0.332961830 0.351841389 0.353053064 0.355378138 0.355993904 0.360098854 0.363098448 0.364619604 0.384187391 0.386042165 0.392251103 0.410592718 0.426115745 0.431293453 0.462514892 0.469459658 0.479179687 0.484618132 0.484649254 0.487574758 0.491497234 0.509754044 0.515606780 0.535422121 0.569415744 0.575410410 0.591527744 0.594275069 0.607418031 0.608452675 0.645034716 0.647972917 0.649839322 0.674484655 0.678490067 0.688229037 0.693509138 0.694093049 0.700386336 0.704861658 0.718505376 0.742292186 0.751448954 0.759466151 0.772159534 0.774787213 0.779753949 0.811037527 0.816579121 0.820201863 0.823147316 0.823757792 0.832360320 0.835086183 0.838135876 0.842722865 0.845964745 0.847745470 0.850243501 0.859835253 0.865963064 0.869098831 0.874728491 0.886469624 0.888783530 0.889877823 0.900850953 0.901119146 0.904208970 0.924199901 0.928278856 0.936663013 0.938201663 0.966400303 0.977390341 0.987422739 1.001847404 1.020389746 1.028847289 1.042650852 1.052767961 1.058868430 1.069254681 1.087018284 1.089048736 1.105287765 1.111897992 1.112921216 1.128256135 1.136526180 1.141258655 1.145511574 1.176829078 1.179212252 1.181858870 1.187635163 1.191671641 1.198584242 1.224775388 1.229066753 1.274851803 1.303085469 1.321428622 1.328479560 1.333446181 1.336711716 1.338185348 1.342325108 1.344644063 1.345345416 1.359930228 1.379719413 1.383508004 1.386165104 1.408866406 1.421122537 1.431478900 1.551519120 1.686681594 1.776721556</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">313</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33649135" y3="0.0410749" z3="-0.19073461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37980905" y3="0.16616653" z3="0.4247143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64132708" y3="0.43865346" z3="-0.33555167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72429215" y3="1.23099125" z3="-2.25769905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38538245" y3="0.42392214" z3="-1.18403581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72722745" y3="0.83990896" z3="-3.66191843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62910956" y3="1.74284111" z3="-3.13012389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37576658" y3="2.58494387" z3="-4.6096427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5587887" y3="1.24343686" z3="-4.37383415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49636819" y3="2.92017999" z3="-5.16823446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92697229" y3="-0.49063804" z3="-3.44663056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09643312" y3="0.02937311" z3="-1.00503369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4021977" y3="-1.11120863" z3="-2.0100073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9302643" y3="-0.98351607" z3="-1.83768392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1055025" y3="-2.43552411" z3="-1.86001292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14063963" y3="-3.60903275" z3="0.6704291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02679462" y3="-5.26508098" z3="-4.74187437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.25240445" y3="-5.00502564" z3="-3.70413662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84280757" y3="-4.30775253" z3="-1.08475201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77484702" y3="-4.59712907" z3="-2.85531394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56758415" y3="-5.09072105" z3="-3.24303051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86349528" y3="-4.73688152" z3="-1.92905073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49171889" y3="-4.26350529" z3="-1.52930273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80723424" y3="-4.51983197" z3="-3.20467727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36831089" y3="-5.4044518" z3="-3.9158721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89937569" y3="-4.77200396" z3="-1.58333479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02913856" y3="-3.85552956" z3="0.2352345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16845115" y3="-3.64096328" z3="0.88182387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05667003" y3="-4.10517323" z3="0.45082775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16120663" y3="-3.5037808" z3="2.34872819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21534644" y3="-3.31800981" z3="5.14662559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35651436" y3="-3.70751487" z3="3.05377488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99291118" y3="-3.21283871" z3="3.06870492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01721356" y3="-3.12093998" z3="4.45738671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38284998" y3="-3.61655715" z3="4.44260652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27228845" y3="-3.94735732" z3="2.50680517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03412965" y3="-3.07999773" z3="2.56269203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08721898" y3="-2.91565564" z3="4.99506876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32058867" y3="-3.78628227" z3="4.97905723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2337682" y3="-3.25415894" z3="6.23819516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41483451" y3="-3.89897033" z3="-0.62839272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17430301" y3="-3.40034618" z3="-1.08445617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52060109" y3="0.23723814" z3="-4.71490619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08012779" y3="-1.71731856" z3="0.023267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89782035" y3="-0.9623189" z3="1.18128113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83381466" y3="-0.31134396" z3="1.50573076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36072649" y3="0.56330753" z3="1.20271956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43712212" y3="1.44932458" z3="-0.43084756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.99124822" y3="-0.69064038" z3="1.39508268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35249012" y3="1.77001844" z3="2.63547676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.86741064" y3="-0.94880765" z3="2.08496286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.62929143" y3="-0.33375675" z3="3.34161076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20395237" y3="0.75152703" z3="-1.25326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34164549" y3="2.23480371" z3="-0.43386647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.41463655" y3="1.93746948" z3="-0.59322731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01626209" y3="-1.04895863" z3="2.43751216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96472626" y3="-0.22964891" z3="1.15713548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86845994" y3="-1.53665336" z3="0.69947731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41089656" y3="1.24122505" z3="3.60329552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58333155" y3="2.3582734" z3="2.62963019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19493476" y3="2.48196622" z3="2.57544427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.76573722" y3="-0.79226835" z3="3.84971701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.54131348" y3="-0.50364564" z3="3.92936355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.45585942" y3="0.74752357" z3="3.21870004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83849952" y3="-0.72028512" z3="0.98969041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40659867" y3="-2.04486127" z3="0.84587859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75486137" y3="-2.69336197" z3="1.88742599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55253619" y3="-2.00462849" z3="3.0796287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03815486" y3="-0.71585835" z3="3.28028593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6890489" y3="-0.08063392" z3="2.22743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50590409" y3="-2.53855066" z3="-0.12279945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35338742" y3="-3.69968424" z3="1.75970899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69261825" y3="-2.60576484" z3="4.10398284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86177176" y3="-0.21004835" z3="4.23011359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03659154" y3="0.94909037" z3="2.34681933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79757603" y3="0.45642152" z3="-4.29300322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77628895" y3="-0.51183846" z3="-4.47224502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42624357" y3="-1.70330274" z3="-5.09778221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13887749" y3="-1.9329446" z3="-5.57326217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83275992" y3="-0.96127308" z3="-5.37101056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04440404" y3="1.37943844" z3="-3.7613062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79587116" y3="-0.36666932" z3="-4.11457971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43712886" y3="-2.75366144" z3="-5.24000118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09251759" y3="-2.87296326" z3="-6.07343106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85519427" y3="-1.14611177" z3="-5.70457365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3711959" y3="-1.91537256" z3="5.05197644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31051985" y3="-3.74427006" z3="3.93136523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21102515" y3="-3.65594275" z3="-6.0174954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44147937" y3="-2.66890857" z3="-4.56111648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06556351" y3="1.16759365" z3="-1.48005198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10628746" y3="1.55525504" z3="-2.46032697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43326945" y3="1.50694278" z3="-1.67113579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84338358" y3="2.17926363" z3="-2.79614833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.15839138" y3="1.21078381" z3="-0.90680146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.8990229" y3="2.42984375" z3="-2.9349399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5669947" y3="2.23221548" z3="-3.62405973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89725956" y3="2.5344049" z3="-3.78743384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84688771" y3="2.50262191" z3="-4.39987963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22890618" y3="3.0473311" z3="-4.69410664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39411737" y3="3.14680363" z3="-3.32192027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2788177" y3="3.55894716" z3="-4.10932231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19727307" y3="4.15824285" z3="-2.72253531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9430785" y3="5.49110749" z3="-2.94186472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02534559" y3="3.86971464" z3="-2.07328048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57649376" y3="6.24717642" z3="-2.46856583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05002165" y3="4.94522583" z3="-4.32986343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86685994" y3="5.89446718" z3="-3.76738191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19863626" y3="5.24261142" z3="-4.94992417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68007469" y3="6.95774007" z3="-3.94141479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48064904" y3="-2.19448402" z3="-0.28663595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45602067" y3="-2.99074991" z3="-1.05004071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00557164" y3="-2.57172208" z3="0.60580835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09605459" y3="-1.37568749" z3="-0.70530286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18223035" y3="-1.42488136" z3="-1.15269178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31993482" y3="-0.38486377" z3="-1.50240068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10488433" y3="-1.55034661" z3="-0.95207806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42724441" y3="-2.08133452" z3="-2.00107679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3365,.0411,-.1907;7.3798,.1662,.4247;6.6413,.4387,-.3356;4.7243,1.231,-2.2577;4.3854,.4239,-1.184;2.7272,.8399,-3.6619;3.6291,1.7428,-3.1301;1.3758,2.5849,-4.6096;1.5588,1.2434,-4.3738;.4964,2.9202,-5.1682;2.927,-.4906,-3.4466;3.0964,.0294,-1.005;2.4022,-1.1112,-2.01;.9303,-.9835,-1.8377;3.1055,-2.4355,-1.86;-.1406,-3.609,.6704;-.0268,-5.2651,-4.7419;-.2524,-5.005,-3.7041;-.8428,-4.3078,-1.0848;.7748,-4.5971,-2.8553;-1.5676,-5.0907,-3.243;-1.8635,-4.7369,-1.9291;.4917,-4.2635,-1.5293;1.8072,-4.5198,-3.2047;-2.3683,-5.4045,-3.9159;-2.8994,-4.772,-1.5833;-1.0291,-3.8555,.2352;-2.1685,-3.641,.8818;-3.0567,-4.1052,.4508;-2.1612,-3.5038,2.3487;-2.2153,-3.318,5.1466;-3.3565,-3.7075,3.0538;-.9929,-3.2128,3.0687;-1.0172,-3.1209,4.4574;-3.3828,-3.6166,4.4426;-4.2723,-3.9474,2.5068;-.0341,-3.08,2.5627;-.0872,-2.9157,4.9951;-4.3206,-3.7863,4.9791;-2.2338,-3.2542,6.2382;1.4148,-3.899,-.6284;2.1743,-3.4003,-1.0845;.5206,.2372,-4.7149;-3.0801,-1.7173,.0233;-2.8978,-.9623,1.1813;-1.8338,-.3113,1.5057;-.3607,.5633,1.2027;-.4371,1.4493,-.4308;.9912,-.6906,1.3951;-.3525,1.77,2.6355;-3.8674,-.9488,2.085;-3.6293,-.3338,3.3416;-.204,.7515,-1.2533;.3416,2.2348,-.4339;-1.4146,1.9375,-.5932;1.0163,-1.049,2.4375;1.9647,-.2296,1.1571;.8685,-1.5367,.6995;-.4109,1.2412,3.6033;.5833,2.3583,2.6296;-1.1949,2.482,2.5754;-2.7657,-.7923,3.8497;-4.5413,-.5036,3.9294;-3.4559,.7475,3.2187;4.8385,-.7203,.9897;4.4066,-2.0449,.8459;3.7549,-2.6934,1.8874;3.5525,-2.0046,3.0796;4.0382,-.7159,3.2803;4.689,-.0806,2.2274;4.5059,-2.5386,-.1228;3.3534,-3.6997,1.7597;2.6926,-2.6058,4.104;3.8618,-.21,4.2301;5.0366,.9491,2.3468;-.7976,.4564,-4.293;-1.7763,-.5118,-4.4722;-1.4262,-1.7033,-5.0978;-.1389,-1.9329,-5.5733;.8328,-.9613,-5.371;-1.0444,1.3794,-3.7613;-2.7959,-.3667,-4.1146;-2.4371,-2.7537,-5.24;.0925,-2.873,-6.0734;1.8552,-1.1461,-5.7046;2.3712,-1.9154,5.052;2.3105,-3.7443,3.9314;-2.211,-3.6559,-6.0175;-3.4415,-2.6689,-4.5611;7.0656,1.1676,-1.4801;6.1063,1.5553,-2.4603;8.4333,1.5069,-1.6711;8.8434,2.1793,-2.7961;9.1584,1.2108,-.9068;9.899,2.4298,-2.9349;6.567,2.2322,-3.6241;7.8973,2.5344,-3.7874;5.8469,2.5026,-4.3999;8.2289,3.0473,-4.6941;3.3941,3.1468,-3.3219;2.2788,3.5589,-4.1093;4.1973,4.1582,-2.7225;3.9431,5.4911,-2.9419;5.0253,3.8697,-2.0733;4.5765,6.2472,-2.4686;2.05,4.9452,-4.3299;2.8669,5.8945,-3.7674;1.1986,5.2426,-4.9499;2.6801,6.9577,-3.9414;-4.4806,-2.1945,-.2866;-4.456,-2.9907,-1.05;-5.0056,-2.5717,.6058;-5.0961,-1.3757,-.7053;-2.1822,-1.4249,-1.1527;-2.3199,-.3849,-1.5024;-1.1049,-1.5503,-.9521;-2.4272,-2.0813,-2.0011;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418687421</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001337285255 0.000215039625 0.019138541969 0.005423153525</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030769275 -0.000308055 -0.000004415 0.000128430 0.000256659 0.000273647 0.000375844 0.000398706 0.000581520 0.000819086 0.000882645 0.000955193 0.001198900 0.001243407 0.001419230 0.001514932 0.001551065 0.001699471 0.001783724 0.001911421 0.001979809 0.002251605 0.002392191 0.002535576 0.002674459 0.003029307 0.003047371 0.003115624 0.003568321 0.003848174 0.004408204 0.004670063 0.004780585 0.005095154 0.006005165 0.006110454 0.006296468 0.006674191 0.006876326 0.007573578 0.007977266 0.008222368 0.008416968 0.009439824 0.009565926 0.010055254 0.010113790 0.011160202 0.011907891 0.012229200 0.013007385 0.013152589 0.014374797 0.014878167 0.015408165 0.015821602 0.016003945 0.016603755 0.016789703 0.017529621 0.018260173 0.018842372 0.019331544 0.019641991 0.020204241 0.020726944 0.021248948 0.021406890 0.022133041 0.023090007 0.023708310 0.026497742 0.026897523 0.028044206 0.028261185 0.029596326 0.030525542 0.031636918 0.033243215 0.033737611 0.034165471 0.035773702 0.037183276 0.037409064 0.039426688 0.039880436 0.040210499 0.041114643 0.042593434 0.044727882 0.045734314 0.047165829 0.048040903 0.049286134 0.050516129 0.051089405 0.051312187 0.051776704 0.052493903 0.052813125 0.052963371 0.053266856 0.054858092 0.054991498 0.056229890 0.056403020 0.056594329 0.057068975 0.057242391 0.059223668 0.060655656 0.061075948 0.061883999 0.062417800 0.063435934 0.064541482 0.065324006 0.066119872 0.066620076 0.068508449 0.069285556 0.070289529 0.072805994 0.074500910 0.074806959 0.076537554 0.079221598 0.084568444 0.086969690 0.087227459 0.087741411 0.089772873 0.090710046 0.091570359 0.094309792 0.095082216 0.095917591 0.096506449 0.097871463 0.098857330 0.100237974 0.100852674 0.102445670 0.103229621 0.103658529 0.104361711 0.104600834 0.105257206 0.106375524 0.107099255 0.108252074 0.110109425 0.111220658 0.112521121 0.113572752 0.115134770 0.116293675 0.116869942 0.118778453 0.121385080 0.122550218 0.123849575 0.125481295 0.126268108 0.126420313 0.126803558 0.127856510 0.132188510 0.135127920 0.135921740 0.143176694 0.144085395 0.147100106 0.147657346 0.149802884 0.151828930 0.154690920 0.155017538 0.156739941 0.161355755 0.162012486 0.173829862 0.174479041 0.182123689 0.185551735 0.186587321 0.189697569 0.190447953 0.194496400 0.195836676 0.198976689 0.200420425 0.205251852 0.207200454 0.207523857 0.210298899 0.216845046 0.217400323 0.217997802 0.220232010 0.220896445 0.225437522 0.226776016 0.232424119 0.235214334 0.235750934 0.236122545 0.244764625 0.256140333 0.257377049 0.264015337 0.269983483 0.280791919 0.283863154 0.286398536 0.291990570 0.297058251 0.304570704 0.306039924 0.307346770 0.314623414 0.316836564 0.317457808 0.322270778 0.330197827 0.332980466 0.351844441 0.353055896 0.355398857 0.356003494 0.360102150 0.363104603 0.364621234 0.384185169 0.386053074 0.392251516 0.410605905 0.426118270 0.431293432 0.462517681 0.469487556 0.479190477 0.484623613 0.484658896 0.487574160 0.491498396 0.509783022 0.515607011 0.535423330 0.569442336 0.575413379 0.591532223 0.594284929 0.607425150 0.608459069 0.645038035 0.647986066 0.649859869 0.674491583 0.678490574 0.688237044 0.693513885 0.694123628 0.700406062 0.704867573 0.718524418 0.742296624 0.751451159 0.759466717 0.772179407 0.774812179 0.779756415 0.811041214 0.816579289 0.820207291 0.823163940 0.823759360 0.832381581 0.835090395 0.838149442 0.842735359 0.845966160 0.847748858 0.850249350 0.859850924 0.865964083 0.869113715 0.874737226 0.886498169 0.888836260 0.889884807 0.900875951 0.901123644 0.904214195 0.924221898 0.928299424 0.936673785 0.938218856 0.966406635 0.977402897 0.987435547 1.001864315 1.020391916 1.028849863 1.042665995 1.052797210 1.058910827 1.069255529 1.087023600 1.089073430 1.105321801 1.111916208 1.112948716 1.128407515 1.136536851 1.141272901 1.145539690 1.176838210 1.179213678 1.181859791 1.187649763 1.191672493 1.198625484 1.224782204 1.229068209 1.274921654 1.303085936 1.321430462 1.328484286 1.333465930 1.336714255 1.338189348 1.342348325 1.344685704 1.345396561 1.359944023 1.379725587 1.383514008 1.386173740 1.408936833 1.421187645 1.431490028 1.551519728 1.686764894 1.776744992</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">314</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33997847" y3="0.04235388" z3="-0.19323136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38558395" y3="0.16218044" z3="0.41672773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64588142" y3="0.43637691" z3="-0.3417139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72601851" y3="1.23185161" z3="-2.25980721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38762265" y3="0.42652294" z3="-1.18473432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72697332" y3="0.84166667" z3="-3.66095291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63006745" y3="1.74432365" z3="-3.13083564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37553219" y3="2.58707941" z3="-4.60796275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55822448" y3="1.24552626" z3="-4.37210818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49564722" y3="2.92260045" z3="-5.16566553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9257777" y3="-0.48884237" z3="-3.44435725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09831173" y3="0.03421074" z3="-1.00328179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40235097" y3="-1.1070445" z3="-2.00616748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93069942" y3="-0.97809334" z3="-1.83240937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10532155" y3="-2.43146743" z3="-1.85549043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14027853" y3="-3.61238033" z3="0.67174108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01933219" y3="-5.26143646" z3="-4.74226654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24636597" y3="-5.0027691" z3="-3.70450149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84053091" y3="-4.30884414" z3="-1.08505952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77958686" y3="-4.59470688" z3="-2.85410811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56204285" y3="-5.09029019" z3="-3.24494582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85991411" y3="-4.73806622" z3="-1.93095552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49453051" y3="-4.26258736" z3="-1.52812574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81202583" y3="-4.51553286" z3="-3.20213077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36184208" y3="-5.40407985" z3="-3.91901926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89593756" y3="-4.77510094" z3="-1.58644799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02863807" y3="-3.85804349" z3="0.23511372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16866643" y3="-3.64369858" z3="0.8804231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05646925" y3="-4.10773759" z3="0.4483655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16287073" y3="-3.5061064" z3="2.3472743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22009629" y3="-3.31724707" z3="5.14489374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35890776" y3="-3.70920241" z3="3.05119781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99532904" y3="-3.214516" z3="3.06827231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02119197" y3="-3.12095677" z3="4.45679024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38670203" y3="-3.61680541" z3="4.43990882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27423299" y3="-3.9492907" z3="2.50342877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03589597" y3="-3.08222794" z3="2.56328908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09166401" y3="-2.91494994" z3="4.99513967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32501272" y3="-3.78590587" z3="4.97550494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23981425" y3="-3.25203322" z3="6.23635228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41621704" y3="-3.89749049" z3="-0.62592934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17553424" y3="-3.39716759" z3="-1.08091585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51970728" y3="0.23941708" z3="-4.71232208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07815637" y3="-1.71969896" z3="0.02025959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90100224" y3="-0.96613085" z3="1.17990076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83847139" y3="-0.31552932" z3="1.50999026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36539684" y3="0.56076909" z3="1.2117408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44103692" y3="1.45206905" z3="-0.41915589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98864473" y3="-0.69172708" z3="1.39977924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35972775" y3="1.76101927" z3="2.65000877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87464761" y3="-0.95382743" z3="2.07912925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6437582" y3="-0.33755598" z3="3.33626858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2014658" y3="0.75784613" z3="-1.24282721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33306374" y3="2.24213919" z3="-0.41734386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42074442" y3="1.93493411" z3="-0.58334557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01505045" y3="-1.05287657" z3="2.44124517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96127706" y3="-0.22833196" z3="1.16243703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86702618" y3="-1.53614029" z3="0.70198397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41960983" y3="1.22714965" z3="3.6150352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57591254" y3="2.34941878" z3="2.64876873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20225793" y3="2.47301263" z3="2.59242544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7811372" y3="-0.7933565" z3="3.84833115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55785478" y3="-0.50984976" z3="3.91991696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47289017" y3="0.7443294" z3="3.21356133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84177489" y3="-0.7162815" z3="0.98888128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41002753" y3="-2.04115823" z3="0.847856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75775579" y3="-2.68732254" z3="1.89056078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55471574" y3="-1.99591031" z3="3.08118038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0398174" y3="-0.70655345" z3="3.27897972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69134537" y3="-0.07371566" z3="2.22501557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51035647" y3="-2.53702554" z3="-0.11927147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35656441" y3="-3.69393913" z3="1.76501393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6937585" y3="-2.59469276" z3="4.10610086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86272781" y3="-0.19849225" z3="4.22760399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03875514" y3="0.95634846" z3="2.34229254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79792582" y3="0.45826844" z3="-4.2886013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77677602" y3="-0.51007692" z3="-4.46781354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42731955" y3="-1.70120005" z3="-5.09378507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14043216" y3="-1.93046184" z3="-5.57066742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83125598" y3="-0.95874756" z3="-5.36943661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0440516" y3="1.38089741" z3="-3.75628597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79591157" y3="-0.36518899" z3="-4.10862534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43814278" y3="-2.75159776" z3="-5.23502937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09073955" y3="-2.87026445" z3="-6.07174088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85336005" y3="-1.14329816" z3="-5.70413668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3709643" y3="-1.9021693" z3="5.0517218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31159833" y3="-3.73359308" z3="3.93553182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21307802" y3="-3.65335494" z3="-6.01353219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44137557" y3="-2.66721038" z3="-4.55457829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06920091" y3="1.16234814" z3="-1.48831139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10825037" y3="1.55222901" z3="-2.46615158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43740309" y3="1.49588692" z3="-1.68419146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84642283" y3="2.16599878" z3="-2.81097697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16391706" y3="1.19738567" z3="-0.9220974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90247811" y3="2.41198459" z3="-2.95350997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56754889" y3="2.22682926" z3="-3.63162973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89853536" y3="2.5245802" z3="-3.79929584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84603756" y3="2.49953654" z3="-4.40532139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22918492" y3="3.03633488" z3="-4.70720335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39576981" y3="3.14827692" z3="-3.32282284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27938842" y3="3.56089648" z3="-4.10846239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20059532" y3="4.1590809" z3="-2.7249266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94610185" y3="5.49213886" z3="-2.94306646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02996604" y3="3.86989536" z3="-2.07756145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58060675" y3="6.24773512" z3="-2.47081148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05055308" y3="4.94729579" z3="-4.32810799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86835893" y3="5.89604093" z3="-3.76637479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.1982841" y3="5.24513823" z3="-4.94675126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.68119792" y3="6.95947031" z3="-3.93929172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47712631" y3="-2.19713422" z3="-0.29611491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44890368" y3="-2.99112162" z3="-1.06164189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0050486" y3="-2.57725366" z3="0.59328863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09165189" y3="-1.37764329" z3="-0.71476656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17547773" y3="-1.42548203" z3="-1.15145843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3105208" y3="-0.38452572" z3="-1.49914031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09918843" y3="-1.55218436" z3="-0.94743646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41839908" y3="-2.07948221" z3="-2.00222444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.34,.0424,-.1932;7.3856,.1622,.4167;6.6459,.4364,-.3417;4.726,1.2319,-2.2598;4.3876,.4265,-1.1847;2.727,.8417,-3.661;3.6301,1.7443,-3.1308;1.3755,2.5871,-4.608;1.5582,1.2455,-4.3721;.4956,2.9226,-5.1657;2.9258,-.4888,-3.4444;3.0983,.0342,-1.0033;2.4024,-1.107,-2.0062;.9307,-.9781,-1.8324;3.1053,-2.4315,-1.8555;-.1403,-3.6124,.6717;-.0193,-5.2614,-4.7423;-.2464,-5.0028,-3.7045;-.8405,-4.3088,-1.0851;.7796,-4.5947,-2.8541;-1.562,-5.0903,-3.2449;-1.8599,-4.7381,-1.931;.4945,-4.2626,-1.5281;1.812,-4.5155,-3.2021;-2.3618,-5.4041,-3.919;-2.8959,-4.7751,-1.5864;-1.0286,-3.858,.2351;-2.1687,-3.6437,.8804;-3.0565,-4.1077,.4484;-2.1629,-3.5061,2.3473;-2.2201,-3.3172,5.1449;-3.3589,-3.7092,3.0512;-.9953,-3.2145,3.0683;-1.0212,-3.121,4.4568;-3.3867,-3.6168,4.4399;-4.2742,-3.9493,2.5034;-.0359,-3.0822,2.5633;-.0917,-2.9149,4.9951;-4.325,-3.7859,4.9755;-2.2398,-3.252,6.2364;1.4162,-3.8975,-.6259;2.1755,-3.3972,-1.0809;.5197,.2394,-4.7123;-3.0782,-1.7197,.0203;-2.901,-.9661,1.1799;-1.8385,-.3155,1.51;-.3654,.5608,1.2117;-.441,1.4521,-.4192;.9886,-.6917,1.3998;-.3597,1.761,2.65;-3.8746,-.9538,2.0791;-3.6438,-.3376,3.3363;-.2015,.7578,-1.2428;.3331,2.2421,-.4173;-1.4207,1.9349,-.5833;1.0151,-1.0529,2.4412;1.9613,-.2283,1.1624;.867,-1.5361,.702;-.4196,1.2271,3.615;.5759,2.3494,2.6488;-1.2023,2.473,2.5924;-2.7811,-.7934,3.8483;-4.5579,-.5098,3.9199;-3.4729,.7443,3.2136;4.8418,-.7163,.9889;4.41,-2.0412,.8479;3.7578,-2.6873,1.8906;3.5547,-1.9959,3.0812;4.0398,-.7066,3.279;4.6913,-.0737,2.225;4.5104,-2.537,-.1193;3.3566,-3.6939,1.765;2.6938,-2.5947,4.1061;3.8627,-.1985,4.2276;5.0388,.9563,2.3423;-.7979,.4583,-4.2886;-1.7768,-.5101,-4.4678;-1.4273,-1.7012,-5.0938;-.1404,-1.9305,-5.5707;.8313,-.9587,-5.3694;-1.0441,1.3809,-3.7563;-2.7959,-.3652,-4.1086;-2.4381,-2.7516,-5.235;.0907,-2.8703,-6.0717;1.8534,-1.1433,-5.7041;2.371,-1.9022,5.0517;2.3116,-3.7336,3.9355;-2.2131,-3.6534,-6.0135;-3.4414,-2.6672,-4.5546;7.0692,1.1623,-1.4883;6.1083,1.5522,-2.4662;8.4374,1.4959,-1.6842;8.8464,2.166,-2.811;9.1639,1.1974,-.9221;9.9025,2.412,-2.9535;6.5675,2.2268,-3.6316;7.8985,2.5246,-3.7993;5.846,2.4995,-4.4053;8.2292,3.0363,-4.7072;3.3958,3.1483,-3.3228;2.2794,3.5609,-4.1085;4.2006,4.1591,-2.7249;3.9461,5.4921,-2.9431;5.03,3.8699,-2.0776;4.5806,6.2477,-2.4708;2.0506,4.9473,-4.3281;2.8684,5.896,-3.7664;1.1983,5.2451,-4.9468;2.6812,6.9595,-3.9393;-4.4771,-2.1971,-.2961;-4.4489,-2.9911,-1.0616;-5.005,-2.5773,.5933;-5.0917,-1.3776,-.7148;-2.1755,-1.4255,-1.1515;-2.3105,-.3845,-1.4991;-1.0992,-1.5522,-.9474;-2.4184,-2.0795,-2.0022;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650425847982</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000636289637 0.000107346837 0.019506445096 0.005367960937</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030775656 -0.000204776 0.000083712 0.000163279 0.000253368 0.000269884 0.000393417 0.000438322 0.000578333 0.000820114 0.000881757 0.000956178 0.001198505 0.001233444 0.001418516 0.001505441 0.001548346 0.001694066 0.001775875 0.001910022 0.001979391 0.002249642 0.002386431 0.002537960 0.002678744 0.003026543 0.003042751 0.003112912 0.003569229 0.003851784 0.004408100 0.004669154 0.004781752 0.005098821 0.006004083 0.006105699 0.006296357 0.006676613 0.006873592 0.007566254 0.007971448 0.008224319 0.008416254 0.009444383 0.009552367 0.010052547 0.010113235 0.011159814 0.011907985 0.012229123 0.013007406 0.013153699 0.014377223 0.014877545 0.015412383 0.015822410 0.016006698 0.016604924 0.016795762 0.017538126 0.018259878 0.018847080 0.019325711 0.019642220 0.020203853 0.020726266 0.021250363 0.021408548 0.022126944 0.023092335 0.023702333 0.026503081 0.026899977 0.028057105 0.028269647 0.029597500 0.030526484 0.031638768 0.033241526 0.033739977 0.034166375 0.035774462 0.037184612 0.037412242 0.039426054 0.039873640 0.040210436 0.041119333 0.042593521 0.044728480 0.045739991 0.047167160 0.048041698 0.049286349 0.050516302 0.051089381 0.051312620 0.051781586 0.052493954 0.052813152 0.052963791 0.053268184 0.054859939 0.054991892 0.056235368 0.056409334 0.056595991 0.057069774 0.057242436 0.059226099 0.060655797 0.061076957 0.061893438 0.062417984 0.063436288 0.064541770 0.065324209 0.066127786 0.066620229 0.068522563 0.069287265 0.070289353 0.072807031 0.074510888 0.074807216 0.076538174 0.079228280 0.084569942 0.086972427 0.087238353 0.087750799 0.089777601 0.090710071 0.091572578 0.094312632 0.095086819 0.095920936 0.096506768 0.097871637 0.098858308 0.100238059 0.100853133 0.102446370 0.103230973 0.103659807 0.104370845 0.104601494 0.105294298 0.106376031 0.107103024 0.108257265 0.110121860 0.111223255 0.112524445 0.113573886 0.115142482 0.116293987 0.116870337 0.118779732 0.121388134 0.122551268 0.123861778 0.125499965 0.126270934 0.126421025 0.126806165 0.127863313 0.132192510 0.135139555 0.135931640 0.143178850 0.144093557 0.147103096 0.147656783 0.149816036 0.151834965 0.154692569 0.155022990 0.156744121 0.161356218 0.162012536 0.173829822 0.174479415 0.182144475 0.185571085 0.186586603 0.189701664 0.190448911 0.194498473 0.195844716 0.198980382 0.200426928 0.205253150 0.207205432 0.207544187 0.210301641 0.216849556 0.217415325 0.218003365 0.220279092 0.220898254 0.225439764 0.226779450 0.232424415 0.235214400 0.235751880 0.236123993 0.244767924 0.256140779 0.257379361 0.264016232 0.269983937 0.280791915 0.283875881 0.286399619 0.291992703 0.297061932 0.304580939 0.306040454 0.307356923 0.314639561 0.316838131 0.317457910 0.322270822 0.330198959 0.332992468 0.351847120 0.353058425 0.355413780 0.356010433 0.360105476 0.363108794 0.364620906 0.384187789 0.386059103 0.392251722 0.410621315 0.426121743 0.431294346 0.462520084 0.469504020 0.479198057 0.484628520 0.484664881 0.487577334 0.491500211 0.509810082 0.515607531 0.535423634 0.569466678 0.575414153 0.591535515 0.594297039 0.607429682 0.608463224 0.645041275 0.647994865 0.649877099 0.674499322 0.678491420 0.688244320 0.693520080 0.694138153 0.700412632 0.704871675 0.718537678 0.742300646 0.751452874 0.759468477 0.772195134 0.774825614 0.779760596 0.811043968 0.816579747 0.820211153 0.823183540 0.823762085 0.832396015 0.835092421 0.838158773 0.842748673 0.845968212 0.847750879 0.850252983 0.859864692 0.865964815 0.869132732 0.874744212 0.886518033 0.888875876 0.889893013 0.900898249 0.901129680 0.904221061 0.924230803 0.928311118 0.936685923 0.938230825 0.966409028 0.977411098 0.987445646 1.001874008 1.020395398 1.028850433 1.042671479 1.052830542 1.058950445 1.069255636 1.087031416 1.089093333 1.105342225 1.111933686 1.112962235 1.128519861 1.136550732 1.141279693 1.145567571 1.176846793 1.179215393 1.181863645 1.187655274 1.191674021 1.198644956 1.224788316 1.229069918 1.274965491 1.303087922 1.321432415 1.328487887 1.333478460 1.336715022 1.338197309 1.342361408 1.344703413 1.345417455 1.359956478 1.379727614 1.383519463 1.386175639 1.408992918 1.421231534 1.431525015 1.551520068 1.686816481 1.776762263</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">315</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34143172" y3="0.04354778" z3="-0.19306161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38720116" y3="0.16675764" z3="0.41639081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64672382" y3="0.44076839" z3="-0.34133314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72458476" y3="1.23410271" z3="-2.2581959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38787523" y3="0.42710225" z3="-1.18373516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72663876" y3="0.84040425" z3="-3.65989433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62760442" y3="1.74489588" z3="-3.12894245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37244236" y3="2.58341034" z3="-4.60722303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55735989" y3="1.24212793" z3="-4.37138836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49236502" y3="2.91728714" z3="-5.16564744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92826067" y3="-0.48995878" z3="-3.44352039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09916575" y3="0.03205812" z3="-1.00198371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40349766" y3="-1.10871927" z3="-2.0058615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93179227" y3="-0.97890795" z3="-1.83336908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10551839" y3="-2.43361337" z3="-1.85490868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14215277" y3="-3.61247791" z3="0.67248083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01893375" y3="-5.26859349" z3="-4.73906468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2466851" y3="-5.00784234" z3="-3.70199807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84267838" y3="-4.30898354" z3="-1.08438968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77874363" y3="-4.59820134" z3="-2.85169254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56241931" y3="-5.09492075" z3="-3.24323749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86121309" y3="-4.7401721" z3="-1.93010286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49277063" y3="-4.26353462" z3="-1.52657558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81175542" y3="-4.52021115" z3="-3.19903568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36227417" y3="-5.40937976" z3="-3.91746277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8978513" y3="-4.77621572" z3="-1.58613733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03144855" y3="-3.85610848" z3="0.23509169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17111838" y3="-3.6404811" z3="0.8799455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05961807" y3="-4.10203265" z3="0.44670431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16638913" y3="-3.50206658" z3="2.34655809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22540412" y3="-3.31007303" z3="5.14394858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36429049" y3="-3.69849594" z3="3.04953866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.9978142" y3="-3.21625927" z3="3.06845498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02466168" y3="-3.12085989" z3="4.45677318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39286542" y3="-3.6046684" z3="4.43815012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28046514" y3="-3.93433332" z3="2.50118788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03689945" y3="-3.09035873" z3="2.56442265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09434212" y3="-2.9191062" z3="4.9954372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33216311" y3="-3.76924989" z3="4.97295513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24601688" y3="-3.24342724" z3="6.235293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41431243" y3="-3.89739891" z3="-0.62437945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17473017" y3="-3.39837786" z3="-1.07966823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52015322" y3="0.23448615" z3="-4.71205833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07625096" y3="-1.71321425" z3="0.01807362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.89908236" y3="-0.960133" z3="1.17780011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.83631028" y3="-0.31101797" z3="1.50975623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35803176" y3="0.55692427" z3="1.213085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43001515" y3="1.4536736" z3="-0.4150863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98977449" y3="-0.70293364" z3="1.39717005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.34394163" y3="1.752506" z3="2.65550145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87400739" y3="-0.94580272" z3="2.07568188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64446954" y3="-0.32807575" z3="3.33194783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19764528" y3="0.76022781" z3="-1.24136108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.35085259" y3="2.2371235" z3="-0.41293088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4059865" y3="1.94500343" z3="-0.57551559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.014472" y3="-1.06674561" z3="2.4379632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.96486087" y3="-0.24333256" z3="1.16104392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86445499" y3="-1.54529444" z3="0.69757996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40508901" y3="1.21568919" z3="3.61872167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59483179" y3="2.33591675" z3="2.6549179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18275149" y3="2.46916488" z3="2.60205621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78401869" y3="-0.78489202" z3="3.84643884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5601316" y3="-0.49749736" z3="3.91391535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.470307" y3="0.7534984" z3="3.20795735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84442579" y3="-0.7178605" z3="0.98784185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41586141" y3="-2.04371343" z3="0.84476559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76334813" y3="-2.69225241" z3="1.88590161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55694171" y3="-2.00238526" z3="3.07697634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0390264" y3="-0.7122186" z3="3.27671328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69095916" y3="-0.07688239" z3="2.22455408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51922264" y3="-2.53870696" z3="-0.12216326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36494354" y3="-3.69954592" z3="1.75914591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.694491" y3="-2.60326441" z3="4.0994902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85890583" y3="-0.20529501" z3="4.22525347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03637415" y3="0.95395682" z3="2.34381556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79859814" y3="0.4545425" z3="-4.29207528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77709682" y3="-0.5143304" z3="-4.47209095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42645764" y3="-1.7070794" z3="-5.09288695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13829801" y3="-1.93764918" z3="-5.56608904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83303025" y3="-0.96552876" z3="-5.36546079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04564305" y3="1.37857592" z3="-3.76361571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79697677" y3="-0.36842777" z3="-4.11483933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43706658" y3="-2.75716825" z3="-5.23390208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09490393" y3="-2.8789875" z3="-6.06485938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85596012" y3="-1.15137856" z3="-5.69687164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.37184333" y3="-1.91338165" z3="5.04667901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31010713" y3="-3.74102" z3="3.92457022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2111268" y3="-3.65991553" z3="-6.01110748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44086209" y3="-2.67119616" z3="-4.55499325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06818275" y3="1.16808674" z3="-1.4874915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10606427" y3="1.55673114" z3="-2.46475883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43549006" y3="1.50353943" z3="-1.68370913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84298152" y3="2.17577246" z3="-2.80991441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16281663" y3="1.20565033" z3="-0.92213486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.89839486" y3="2.42321164" z3="-2.95270203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56374352" y3="2.23317069" z3="-3.62972421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89428015" y3="2.53429957" z3="-3.79737843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8417104" y3="2.50596987" z3="-4.40281819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22381558" y3="3.04974389" z3="-4.70450736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39066482" y3="3.14838817" z3="-3.32057945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27403737" y3="3.55885569" z3="-4.10697144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19314496" y3="4.16050335" z3="-2.72195525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.93581192" y3="5.49323355" z3="-2.93950946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02276765" y3="3.87276389" z3="-2.07426005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.56873716" y3="6.24960473" z3="-2.46707369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04263343" y3="4.94464305" z3="-4.32652908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.85787096" y3="5.89505609" z3="-3.76354891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19022641" y3="5.24087754" z3="-4.94572765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.66838677" y3="6.95823628" z3="-3.93600333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4754928" y3="-2.18799151" z3="-0.30049226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44771363" y3="-2.98249581" z3="-1.06553006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00586099" y3="-2.56640279" z3="0.58806796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0876502" y3="-1.3675195" z3="-0.72082781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17121755" y3="-1.42194906" z3="-1.15227764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30556356" y3="-0.38210159" z3="-1.50271868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09505161" y3="-1.54906816" z3="-0.94663955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41319706" y3="-2.07773791" z3="-2.00225785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3414,.0435,-.1931;7.3872,.1668,.4164;6.6467,.4408,-.3413;4.7246,1.2341,-2.2582;4.3879,.4271,-1.1837;2.7266,.8404,-3.6599;3.6276,1.7449,-3.1289;1.3724,2.5834,-4.6072;1.5574,1.2421,-4.3714;.4924,2.9173,-5.1656;2.9283,-.49,-3.4435;3.0992,.0321,-1.002;2.4035,-1.1087,-2.0059;.9318,-.9789,-1.8334;3.1055,-2.4336,-1.8549;-.1422,-3.6125,.6725;-.0189,-5.2686,-4.7391;-.2467,-5.0078,-3.702;-.8427,-4.309,-1.0844;.7787,-4.5982,-2.8517;-1.5624,-5.0949,-3.2432;-1.8612,-4.7402,-1.9301;.4928,-4.2635,-1.5266;1.8118,-4.5202,-3.199;-2.3623,-5.4094,-3.9175;-2.8979,-4.7762,-1.5861;-1.0314,-3.8561,.2351;-2.1711,-3.6405,.8799;-3.0596,-4.102,.4467;-2.1664,-3.5021,2.3466;-2.2254,-3.3101,5.1439;-3.3643,-3.6985,3.0495;-.9978,-3.2163,3.0685;-1.0247,-3.1209,4.4568;-3.3929,-3.6047,4.4382;-4.2805,-3.9343,2.5012;-.0369,-3.0904,2.5644;-.0943,-2.9191,4.9954;-4.3322,-3.7692,4.973;-2.246,-3.2434,6.2353;1.4143,-3.8974,-.6244;2.1747,-3.3984,-1.0797;.5202,.2345,-4.7121;-3.0763,-1.7132,.0181;-2.8991,-.9601,1.1778;-1.8363,-.311,1.5098;-.358,.5569,1.2131;-.43,1.4537,-.4151;.9898,-.7029,1.3972;-.3439,1.7525,2.6555;-3.874,-.9458,2.0757;-3.6445,-.3281,3.3319;-.1976,.7602,-1.2414;.3509,2.2371,-.4129;-1.406,1.945,-.5755;1.0145,-1.0667,2.438;1.9649,-.2433,1.161;.8645,-1.5453,.6976;-.4051,1.2157,3.6187;.5948,2.3359,2.6549;-1.1828,2.4692,2.6021;-2.784,-.7849,3.8464;-4.5601,-.4975,3.9139;-3.4703,.7535,3.208;4.8444,-.7179,.9878;4.4159,-2.0437,.8448;3.7633,-2.6923,1.8859;3.5569,-2.0024,3.077;4.039,-.7122,3.2767;4.691,-.0769,2.2246;4.5192,-2.5387,-.1222;3.3649,-3.6995,1.7591;2.6945,-2.6033,4.0995;3.8589,-.2053,4.2253;5.0364,.954,2.3438;-.7986,.4545,-4.2921;-1.7771,-.5143,-4.4721;-1.4265,-1.7071,-5.0929;-.1383,-1.9376,-5.5661;.833,-.9655,-5.3655;-1.0456,1.3786,-3.7636;-2.797,-.3684,-4.1148;-2.4371,-2.7572,-5.2339;.0949,-2.879,-6.0649;1.856,-1.1514,-5.6969;2.3718,-1.9134,5.0467;2.3101,-3.741,3.9246;-2.2111,-3.6599,-6.0111;-3.4409,-2.6712,-4.555;7.0682,1.1681,-1.4875;6.1061,1.5567,-2.4648;8.4355,1.5035,-1.6837;8.843,2.1758,-2.8099;9.1628,1.2057,-.9221;9.8984,2.4232,-2.9527;6.5637,2.2332,-3.6297;7.8943,2.5343,-3.7974;5.8417,2.506,-4.4028;8.2238,3.0497,-4.7045;3.3907,3.1484,-3.3206;2.274,3.5589,-4.107;4.1931,4.1605,-2.722;3.9358,5.4932,-2.9395;5.0228,3.8728,-2.0743;4.5687,6.2496,-2.4671;2.0426,4.9446,-4.3265;2.8579,5.8951,-3.7635;1.1902,5.2409,-4.9457;2.6684,6.9582,-3.936;-4.4755,-2.188,-.3005;-4.4477,-2.9825,-1.0655;-5.0059,-2.5664,.5881;-5.0877,-1.3675,-.7208;-2.1712,-1.4219,-1.1523;-2.3056,-.3821,-1.5027;-1.0951,-1.5491,-.9466;-2.4132,-2.0777,-2.0023;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650422518978</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001035388141 0.000163241554 0.023939890837 0.005359696870</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030777969 -0.000242612 0.000072348 0.000142414 0.000251933 0.000268090 0.000391914 0.000443144 0.000578581 0.000820613 0.000883619 0.000958640 0.001199305 0.001234043 0.001418684 0.001505135 0.001548861 0.001699205 0.001776335 0.001911947 0.001979308 0.002249505 0.002386902 0.002537609 0.002678143 0.003026371 0.003043084 0.003113858 0.003569333 0.003853142 0.004408520 0.004669497 0.004782104 0.005100997 0.006004908 0.006105284 0.006297991 0.006677305 0.006874523 0.007569223 0.007971096 0.008225251 0.008415656 0.009445254 0.009548649 0.010051129 0.010113033 0.011160142 0.011908329 0.012229695 0.013007561 0.013154018 0.014377303 0.014877850 0.015416917 0.015823700 0.016006784 0.016608331 0.016797614 0.017540294 0.018259535 0.018849013 0.019326047 0.019644043 0.020203323 0.020726724 0.021251268 0.021409143 0.022126868 0.023094288 0.023702779 0.026509552 0.026901340 0.028069766 0.028273933 0.029598727 0.030527246 0.031639845 0.033240915 0.033740197 0.034166497 0.035774902 0.037186241 0.037416249 0.039427896 0.039875567 0.040211105 0.041123884 0.042593532 0.044728529 0.045746906 0.047167081 0.048042728 0.049286925 0.050516273 0.051089139 0.051312940 0.051789425 0.052493956 0.052813400 0.052964789 0.053268389 0.054860107 0.054992173 0.056236394 0.056412977 0.056597445 0.057069648 0.057242576 0.059227442 0.060655821 0.061078047 0.061898915 0.062417917 0.063437523 0.064541782 0.065325177 0.066135198 0.066620349 0.068531974 0.069288608 0.070290250 0.072807560 0.074516820 0.074807419 0.076538508 0.079234235 0.084570151 0.086972537 0.087247388 0.087756126 0.089780834 0.090711040 0.091575173 0.094313339 0.095092674 0.095922854 0.096506904 0.097871666 0.098858235 0.100238126 0.100853393 0.102446798 0.103231088 0.103660818 0.104379078 0.104601644 0.105308331 0.106376270 0.107105839 0.108259168 0.110130790 0.111224193 0.112524985 0.113574122 0.115150103 0.116294218 0.116871563 0.118779668 0.121390240 0.122551802 0.123865684 0.125512256 0.126272534 0.126421220 0.126806204 0.127866904 0.132193530 0.135143822 0.135938025 0.143180265 0.144101006 0.147104341 0.147656838 0.149823655 0.151839599 0.154693138 0.155032624 0.156746139 0.161357067 0.162012709 0.173829758 0.174479950 0.182157867 0.185574233 0.186586707 0.189702980 0.190450708 0.194499343 0.195846526 0.198981836 0.200430245 0.205252483 0.207205926 0.207554926 0.210302471 0.216854370 0.217423209 0.218005343 0.220313898 0.220899710 0.225440028 0.226782088 0.232424592 0.235214657 0.235752400 0.236124202 0.244769999 0.256141344 0.257380623 0.264016340 0.269984219 0.280791899 0.283885571 0.286400456 0.291994241 0.297064759 0.304583578 0.306040601 0.307366640 0.314651220 0.316838215 0.317458165 0.322271187 0.330200705 0.333002475 0.351847829 0.353059312 0.355423319 0.356018477 0.360106752 0.363112468 0.364621777 0.384187953 0.386062144 0.392251960 0.410636090 0.426122989 0.431295163 0.462521819 0.469517463 0.479204530 0.484630441 0.484672927 0.487580011 0.491500857 0.509832527 0.515608796 0.535423908 0.569484148 0.575414969 0.591538614 0.594300425 0.607437047 0.608465838 0.645041390 0.647995645 0.649885089 0.674506480 0.678492663 0.688246584 0.693521214 0.694141693 0.700415391 0.704876035 0.718547003 0.742304389 0.751454135 0.759469954 0.772199644 0.774827658 0.779763623 0.811044074 0.816579919 0.820217565 0.823194720 0.823763200 0.832405193 0.835092837 0.838163652 0.842753404 0.845969042 0.847751121 0.850253781 0.859869225 0.865965024 0.869141338 0.874744318 0.886534958 0.888898088 0.889897178 0.900906192 0.901131099 0.904225648 0.924235219 0.928315530 0.936697702 0.938237564 0.966409495 0.977414348 0.987449181 1.001880565 1.020397195 1.028851419 1.042672602 1.052849523 1.058972685 1.069256069 1.087034864 1.089107615 1.105358113 1.111936264 1.112972795 1.128607047 1.136554782 1.141281078 1.145581295 1.176854399 1.179215899 1.181867711 1.187656118 1.191674395 1.198665293 1.224794194 1.229071005 1.274973272 1.303088745 1.321432942 1.328490216 1.333483001 1.336719743 1.338198556 1.342363601 1.344711959 1.345424755 1.359957935 1.379728660 1.383524460 1.386175610 1.409017939 1.421256616 1.431535152 1.551520070 1.686864969 1.776773559</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">316</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34256115" y3="0.0479381" z3="-0.19458584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38900462" y3="0.16811773" z3="0.41303804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6483235" y3="0.44200461" z3="-0.34458953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72636223" y3="1.23625494" z3="-2.26114168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38906504" y3="0.43180818" z3="-1.18505706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72791916" y3="0.84207289" z3="-3.66152717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.62984231" y3="1.74657079" z3="-3.13264309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37444745" y3="2.58450915" z3="-4.61099209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55877257" y3="1.24342736" z3="-4.37338727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49413742" y3="2.91824396" z3="-5.16909489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92805622" y3="-0.4878217" z3="-3.44226182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10000629" y3="0.03953685" z3="-1.00197497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40311222" y3="-1.10272088" z3="-2.00319099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93150497" y3="-0.97132811" z3="-1.83118349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10407141" y3="-2.42781194" z3="-1.84933828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14592857" y3="-3.61509664" z3="0.67595454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0159002" y3="-5.2610428" z3="-4.73892482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24461632" y3="-5.00257587" z3="-3.70146975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84311259" y3="-4.30976346" z3="-1.08271126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77944591" y3="-4.59135442" z3="-2.85027837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56061658" y3="-5.09331259" z3="-3.24321133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8607182" y3="-4.74161977" z3="-1.92955312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49227329" y3="-4.25973182" z3="-1.52461369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81191036" y3="-4.50915459" z3="-3.19736422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.358766" y3="-5.40958549" z3="-3.91800688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89684744" y3="-4.78199764" z3="-1.58588475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03351228" y3="-3.86003832" z3="0.2374728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17441655" y3="-3.64264126" z3="0.88033549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06295823" y3="-4.10341397" z3="0.44627249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17082657" y3="-3.5049832" z3="2.34718798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23191643" y3="-3.31308539" z3="5.14457385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36934329" y3="-3.70040307" z3="3.04901614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0027925" y3="-3.22043696" z3="3.07027167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03052712" y3="-3.12502943" z3="4.45859382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39902008" y3="-3.60650928" z3="4.43760996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28510808" y3="-3.93531919" z3="2.49974253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0412903" y3="-3.09567765" z3="2.56739886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10046728" y3="-2.92386432" z3="4.99790625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33943871" y3="-3.76917098" z3="4.97161386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25345634" y3="-3.24630882" z3="6.23591716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41194061" y3="-3.89189265" z3="-0.62153254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17199682" y3="-3.39158579" z3="-1.07552931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52114999" y3="0.23605244" z3="-4.71198114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07569271" y3="-1.71521895" z3="0.01810289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90232917" y3="-0.9627915" z3="1.17901209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8398061" y3="-0.31531803" z3="1.51564967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.35874438" y3="0.54933393" z3="1.22205506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.43132362" y3="1.45483708" z3="-0.40122755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98719909" y3="-0.71357302" z3="1.39658426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.33947041" y3="1.73545116" z3="2.67186677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88096966" y3="-0.94773079" z3="2.07276255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65569758" y3="-0.33076045" z3="3.33051918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.19850241" y3="0.76578406" z3="-1.23111815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.34892558" y3="2.23878897" z3="-0.39500005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.40764823" y3="1.94651493" z3="-0.55911503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01534589" y3="-1.0807589" z3="2.43585085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9608694" y3="-0.25282673" z3="1.1590883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85972086" y3="-1.55299593" z3="0.69400474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40089954" y3="1.1917493" z3="3.63141367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.60097389" y3="2.31614261" z3="2.67416788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.17637937" y3="2.45486249" z3="2.62437019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79680451" y3="-0.78795934" z3="3.84774793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57339246" y3="-0.50060552" z3="3.90905889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48206655" y3="0.75067796" z3="3.20772467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8453308" y3="-0.71167062" z3="0.98739036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.42146671" y3="-2.03908082" z3="0.84691996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76860622" y3="-2.68711962" z3="1.88815426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55753091" y3="-1.99506451" z3="3.07700519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03529855" y3="-0.70294462" z3="3.27469268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68705975" y3="-0.06813181" z3="2.22203941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52700493" y3="-2.53559431" z3="-0.11945814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37239365" y3="-3.69572743" z3="1.76230055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69402872" y3="-2.59569528" z3="4.09883487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85197655" y3="-0.19447185" z3="4.22204161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02815944" y3="0.96398651" z3="2.33881053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79684103" y3="0.45547845" z3="-4.28972129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77535801" y3="-0.51319342" z3="-4.46769548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42511345" y3="-1.70541826" z3="-5.09153679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1378089" y3="-1.93553806" z3="-5.56695491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83360029" y3="-0.96340994" z3="-5.36633448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04365259" y3="1.37906138" z3="-3.75900751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79483437" y3="-0.36778487" z3="-4.10961312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43561603" y3="-2.75618204" z3="-5.23206321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09355201" y3="-2.87628084" z3="-6.06564645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85600538" y3="-1.14864317" z3="-5.69975833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36838191" y3="-1.90468621" z3="5.04466201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31274524" y3="-3.73444416" z3="3.92563745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21049846" y3="-3.65809405" z3="-6.01031816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43867044" y3="-2.6719433" z3="-4.55117058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07033885" y3="1.1679439" z3="-1.49181667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.10836109" y3="1.55719436" z3="-2.46887449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43834405" y3="1.50171798" z3="-1.68939786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84607943" y3="2.17104143" z3="-2.81712162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16572958" y3="1.2036352" z3="-0.92800639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90202507" y3="2.4172344" z3="-2.9609865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56632768" y3="2.2310974" z3="-3.63533449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.89708053" y3="2.52872521" z3="-3.80470914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84388469" y3="2.50288664" z3="-4.40849951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.22668066" y3="3.03896941" z3="-4.71351896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.39389014" y3="3.15000238" z3="-3.32654327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27691345" y3="3.56019712" z3="-4.11259296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.19741905" y3="4.16266732" z3="-2.72996429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.94087808" y3="5.49515628" z3="-2.94947516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.02731968" y3="3.87543137" z3="-2.08240551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.57427045" y3="6.25230622" z3="-2.47805976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.04584844" y3="4.94617109" z3="-4.33350622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.86235279" y3="5.89662778" z3="-3.77296153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19303115" y3="5.24208549" z3="-4.95232665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.67350233" y3="6.95961888" z3="-3.94684848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47437916" y3="-2.18864731" z3="-0.30561404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4442934" y3="-2.98171668" z3="-1.07195328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00776762" y3="-2.56830409" z3="0.58072984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08465603" y3="-1.36705875" z3="-0.72643854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16714447" y3="-1.42288391" z3="-1.14943613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29935542" y3="-0.38190661" z3="-1.49866742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09203411" y3="-1.55031844" z3="-0.94052692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40636336" y3="-2.0774771" z3="-2.00078864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3426,.0479,-.1946;7.389,.1681,.413;6.6483,.442,-.3446;4.7264,1.2363,-2.2611;4.3891,.4318,-1.1851;2.7279,.8421,-3.6615;3.6298,1.7466,-3.1326;1.3744,2.5845,-4.611;1.5588,1.2434,-4.3734;.4941,2.9182,-5.1691;2.9281,-.4878,-3.4423;3.1,.0395,-1.002;2.4031,-1.1027,-2.0032;.9315,-.9713,-1.8312;3.1041,-2.4278,-1.8493;-.1459,-3.6151,.676;-.0159,-5.261,-4.7389;-.2446,-5.0026,-3.7015;-.8431,-4.3098,-1.0827;.7794,-4.5914,-2.8503;-1.5606,-5.0933,-3.2432;-1.8607,-4.7416,-1.9296;.4923,-4.2597,-1.5246;1.8119,-4.5092,-3.1974;-2.3588,-5.4096,-3.918;-2.8968,-4.782,-1.5859;-1.0335,-3.86,.2375;-2.1744,-3.6426,.8803;-3.063,-4.1034,.4463;-2.1708,-3.505,2.3472;-2.2319,-3.3131,5.1446;-3.3693,-3.7004,3.049;-1.0028,-3.2204,3.0703;-1.0305,-3.125,4.4586;-3.399,-3.6065,4.4376;-4.2851,-3.9353,2.4997;-.0413,-3.0957,2.5674;-.1005,-2.9239,4.9979;-4.3394,-3.7692,4.9716;-2.2535,-3.2463,6.2359;1.4119,-3.8919,-.6215;2.172,-3.3916,-1.0755;.5211,.2361,-4.712;-3.0757,-1.7152,.0181;-2.9023,-.9628,1.179;-1.8398,-.3153,1.5156;-.3587,.5493,1.2221;-.4313,1.4548,-.4012;.9872,-.7136,1.3966;-.3395,1.7355,2.6719;-3.881,-.9477,2.0728;-3.6557,-.3308,3.3305;-.1985,.7658,-1.2311;.3489,2.2388,-.395;-1.4076,1.9465,-.5591;1.0153,-1.0808,2.4359;1.9609,-.2528,1.1591;.8597,-1.553,.694;-.4009,1.1917,3.6314;.601,2.3161,2.6742;-1.1764,2.4549,2.6244;-2.7968,-.788,3.8477;-4.5734,-.5006,3.9091;-3.4821,.7507,3.2077;4.8453,-.7117,.9874;4.4215,-2.0391,.8469;3.7686,-2.6871,1.8882;3.5575,-1.9951,3.077;4.0353,-.7029,3.2747;4.6871,-.0681,2.222;4.527,-2.5356,-.1195;3.3724,-3.6957,1.7623;2.694,-2.5957,4.0988;3.852,-.1945,4.222;5.0282,.964,2.3388;-.7968,.4555,-4.2897;-1.7754,-.5132,-4.4677;-1.4251,-1.7054,-5.0915;-.1378,-1.9355,-5.567;.8336,-.9634,-5.3663;-1.0437,1.3791,-3.759;-2.7948,-.3678,-4.1096;-2.4356,-2.7562,-5.2321;.0936,-2.8763,-6.0656;1.856,-1.1486,-5.6998;2.3684,-1.9047,5.0447;2.3127,-3.7344,3.9256;-2.2105,-3.6581,-6.0103;-3.4387,-2.6719,-4.5512;7.0703,1.1679,-1.4918;6.1084,1.5572,-2.4689;8.4383,1.5017,-1.6894;8.8461,2.171,-2.8171;9.1657,1.2036,-.928;9.902,2.4172,-2.961;6.5663,2.2311,-3.6353;7.8971,2.5287,-3.8047;5.8439,2.5029,-4.4085;8.2267,3.039,-4.7135;3.3939,3.15,-3.3265;2.2769,3.5602,-4.1126;4.1974,4.1627,-2.73;3.9409,5.4952,-2.9495;5.0273,3.8754,-2.0824;4.5743,6.2523,-2.4781;2.0458,4.9462,-4.3335;2.8624,5.8966,-3.773;1.193,5.2421,-4.9523;2.6735,6.9596,-3.9468;-4.4744,-2.1886,-.3056;-4.4443,-2.9817,-1.072;-5.0078,-2.5683,.5807;-5.0847,-1.3671,-.7264;-2.1671,-1.4229,-1.1494;-2.2994,-.3819,-1.4987;-1.092,-1.5503,-.9405;-2.4064,-2.0775,-2.0008;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420738311</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001219892797 0.000180324082 0.018202351614 0.005335045890</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030779204 -0.000172936 0.000131654 0.000186953 0.000254455 0.000268195 0.000393328 0.000441554 0.000577900 0.000821122 0.000883375 0.000958919 0.001199327 0.001235735 0.001418621 0.001507852 0.001549431 0.001708136 0.001776358 0.001915289 0.001979672 0.002249604 0.002386672 0.002537633 0.002678055 0.003026817 0.003044059 0.003114603 0.003569420 0.003853264 0.004408809 0.004670231 0.004784249 0.005102898 0.006005027 0.006105289 0.006299136 0.006678603 0.006876673 0.007571246 0.007972362 0.008225773 0.008416429 0.009445572 0.009548558 0.010051168 0.010113451 0.011160547 0.011908815 0.012230550 0.013007663 0.013154788 0.014377492 0.014877824 0.015421411 0.015824467 0.016007656 0.016610545 0.016799486 0.017542242 0.018260069 0.018850236 0.019326079 0.019646207 0.020203632 0.020727063 0.021252010 0.021409203 0.022127026 0.023096971 0.023703150 0.026516903 0.026902428 0.028082292 0.028280882 0.029600443 0.030527536 0.031641430 0.033241035 0.033740484 0.034166549 0.035774942 0.037187541 0.037421364 0.039429869 0.039877889 0.040213259 0.041126685 0.042593856 0.044729065 0.045754014 0.047167918 0.048044616 0.049287258 0.050516297 0.051089149 0.051313044 0.051797026 0.052494004 0.052813712 0.052965393 0.053268688 0.054860238 0.054992582 0.056236891 0.056414933 0.056599437 0.057069702 0.057242829 0.059229687 0.060656071 0.061078744 0.061903097 0.062417926 0.063438057 0.064541839 0.065326567 0.066141609 0.066620521 0.068538684 0.069290745 0.070291749 0.072808290 0.074522484 0.074807460 0.076538854 0.079239776 0.084570316 0.086972939 0.087256134 0.087758532 0.089783602 0.090712097 0.091579038 0.094313846 0.095100198 0.095924781 0.096507108 0.097871682 0.098858398 0.100238281 0.100853458 0.102447095 0.103231091 0.103662402 0.104384049 0.104601781 0.105316768 0.106376366 0.107108085 0.108261379 0.110138861 0.111224453 0.112525416 0.113574602 0.115155438 0.116294995 0.116872701 0.118779787 0.121391384 0.122552069 0.123867023 0.125518693 0.126274200 0.126421565 0.126806488 0.127868866 0.132193620 0.135147923 0.135942314 0.143182505 0.144107551 0.147104596 0.147657134 0.149828987 0.151846135 0.154694155 0.155044303 0.156748383 0.161356618 0.162013982 0.173829735 0.174479919 0.182169322 0.185575287 0.186586756 0.189704338 0.190450648 0.194499443 0.195846899 0.198984532 0.200431625 0.205254016 0.207206330 0.207561123 0.210303048 0.216857353 0.217430561 0.218007004 0.220359000 0.220900972 0.225440036 0.226785288 0.232424871 0.235215137 0.235752395 0.236124298 0.244772331 0.256141440 0.257381473 0.264016543 0.269984545 0.280792053 0.283891468 0.286401247 0.291995712 0.297067682 0.304585701 0.306040638 0.307374432 0.314660404 0.316838345 0.317458498 0.322271529 0.330203824 0.333013296 0.351847880 0.353060066 0.355430946 0.356029022 0.360109354 0.363116784 0.364621791 0.384187944 0.386064476 0.392252452 0.410651793 0.426125865 0.431296128 0.462523639 0.469530849 0.479208395 0.484630913 0.484681803 0.487585448 0.491501415 0.509857969 0.515609607 0.535423951 0.569504958 0.575415650 0.591543000 0.594304264 0.607441550 0.608467371 0.645041908 0.647995764 0.649890841 0.674514774 0.678493987 0.688251062 0.693522590 0.694143138 0.700416299 0.704883762 0.718556823 0.742310101 0.751455245 0.759472975 0.772205214 0.774828347 0.779769688 0.811044168 0.816580274 0.820230338 0.823212792 0.823763853 0.832413225 0.835092898 0.838166975 0.842758323 0.845970314 0.847751085 0.850255504 0.859873499 0.865965142 0.869150214 0.874744450 0.886552036 0.888913140 0.889903658 0.900912141 0.901132759 0.904233542 0.924238279 0.928317711 0.936718228 0.938241943 0.966409489 0.977415614 0.987452355 1.001886530 1.020399045 1.028851936 1.042674053 1.052869787 1.058993398 1.069258628 1.087041252 1.089122434 1.105380843 1.111941090 1.112983051 1.128728585 1.136559509 1.141282217 1.145592597 1.176861742 1.179216082 1.181875834 1.187656289 1.191674744 1.198681814 1.224808572 1.229075954 1.274975029 1.303091042 1.321434516 1.328495808 1.333488089 1.336724611 1.338199100 1.342364766 1.344714113 1.345424837 1.359960782 1.379728767 1.383529909 1.386178978 1.409039939 1.421274497 1.431549700 1.551520176 1.686910998 1.776795637</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">317</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34108768" y3="0.05191512" z3="-0.1932131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38727865" y3="0.16938874" z3="0.41529142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64763258" y3="0.44374909" z3="-0.34306848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72796271" y3="1.23762967" z3="-2.26218714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38864695" y3="0.43568568" z3="-1.18474823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7290428" y3="0.84471373" z3="-3.66248509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63268133" y3="1.74852526" z3="-3.13501731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37942393" y3="2.58794614" z3="-4.61594288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56085931" y3="1.2471919" z3="-4.3752446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5000196" y3="2.92208161" z3="-5.17525262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92688167" y3="-0.48540097" z3="-3.44148074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09875109" y3="0.04502788" z3="-1.00159792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40108619" y3="-1.09798194" z3="-2.00156527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92958528" y3="-0.96528276" z3="-1.82974416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10149995" y3="-2.42325304" z3="-1.84605391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14526911" y3="-3.61902103" z3="0.67638178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01598519" y3="-5.25229541" z3="-4.74167642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24472929" y3="-4.99644242" z3="-3.70359973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84346636" y3="-4.30989422" z3="-1.08349926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77918654" y3="-4.58615232" z3="-2.85179709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56014136" y3="-5.0902626" z3="-3.24521999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86032289" y3="-4.7417897" z3="-1.93071506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49183999" y3="-4.25755682" z3="-1.52545163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81186207" y3="-4.50277067" z3="-3.19893835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35870455" y3="-5.40516173" z3="-3.92067842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89677227" y3="-4.78320933" z3="-1.5867879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.0338252" y3="-3.86216112" z3="0.23746414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17427526" y3="-3.64753926" z3="0.88145649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06234626" y3="-4.10881311" z3="0.44699202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17021678" y3="-3.51164895" z3="2.34836861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2303366" y3="-3.32312018" z3="5.14597012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36775974" y3="-3.7117665" z3="3.05084774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0025826" y3="-3.22382999" z3="3.07087904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.0299301" y3="-3.13002594" z3="4.45927433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39682975" y3="-3.61982808" z3="4.43956933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28326535" y3="-3.94892141" z3="2.5019907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0419697" y3="-3.09452755" z3="2.56725962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1001522" y3="-2.9260574" z3="4.99811507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33580556" y3="-3.78737333" z3="4.97399077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25140203" y3="-3.25777531" z3="6.23737276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4113465" y3="-3.89076292" z3="-0.62171778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17127928" y3="-3.38871435" z3="-1.07489635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52197184" y3="0.24035961" z3="-4.71357253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07833218" y3="-1.71977332" z3="0.02185032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90449665" y3="-0.96901904" z3="1.18374753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84316611" y3="-0.31975202" z3="1.51984793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36477368" y3="0.54886822" z3="1.22505116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44178913" y3="1.45574344" z3="-0.39716244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98422087" y3="-0.71116641" z3="1.3964484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3457313" y3="1.73340353" z3="2.67624638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88156301" y3="-0.95755056" z3="2.07934559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6555718" y3="-0.34193111" z3="3.3374473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20569426" y3="0.76819622" z3="-1.22739035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.33479439" y3="2.24333596" z3="-0.39020886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42037691" y3="1.94265273" z3="-0.55486264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01444834" y3="-1.07871513" z3="2.43562114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95773085" y3="-0.24940056" z3="1.15767875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85691857" y3="-1.55085063" z3="0.69422224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40317317" y3="1.18866429" z3="3.6351774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.59326341" y3="2.31642922" z3="2.67694367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.18463407" y3="2.45043342" z3="2.63179076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79573533" y3="-0.79852724" z3="3.85301904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57237568" y3="-0.51339182" z3="3.91718944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48246036" y3="0.73994313" z3="3.21577233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84215527" y3="-0.70592756" z3="0.98930699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41885651" y3="-2.03391581" z3="0.85048919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76642058" y3="-2.6807222" z3="1.89280895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55408993" y3="-1.98669582" z3="3.0804117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0300247" y3="-0.69354321" z3="3.27583017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68241861" y3="-0.06019783" z3="2.2227726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52650414" y3="-2.53245854" z3="-0.11406786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37225248" y3="-3.69010658" z3="1.76935881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69081687" y3="-2.58660373" z3="4.10281574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84482017" y3="-0.18306404" z3="4.2214104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02352207" y3="0.97245638" z3="2.33853318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79530409" y3="0.45966484" z3="-4.28875679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77444465" y3="-0.50883579" z3="-4.46756477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42599374" y3="-1.70013718" z3="-5.09241421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.13933491" y3="-1.92983346" z3="-5.56997172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83274816" y3="-0.95830535" z3="-5.37012649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04044119" y3="1.38264793" z3="-3.75766557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79311703" y3="-0.36369788" z3="-4.10678777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43732204" y3="-2.74967391" z3="-5.23277023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.09220767" y3="-2.86989695" z3="-6.07191625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85471516" y3="-1.14326946" z3="-5.70511277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35911845" y3="-1.89258428" z3="5.04389641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.314648" y3="-3.72795747" z3="3.93358324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2135048" y3="-3.65117315" z3="-6.01206897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43946913" y3="-2.66475019" z3="-4.55130562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07139308" y3="1.1659048" z3="-1.49168186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11049862" y3="1.55446255" z3="-2.47016555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43989223" y3="1.49580928" z3="-1.6893494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.84964025" y3="2.16202485" z3="-2.8182745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16630062" y3="1.19832789" z3="-0.92672034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90592533" y3="2.40489304" z3="-2.96224664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57047956" y3="2.22472952" z3="-3.63782927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90204632" y3="2.52009136" z3="-3.80697479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84933887" y3="2.49726446" z3="-4.41183299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23331178" y3="3.0309593" z3="-4.71618332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40008071" y3="3.15192631" z3="-3.33251813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28434302" y3="3.56262035" z3="-4.12005218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20638224" y3="4.16400467" z3="-2.7389494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95371679" y3="5.4965316" z3="-2.96261103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0354763" y3="3.87631279" z3="-2.09056961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.58966322" y3="6.25291072" z3="-2.49410781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.0575781" y3="4.94811089" z3="-4.34569354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87654654" y3="5.89833168" z3="-3.78763726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20574873" y3="5.24446742" z3="-4.96561089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69074348" y3="6.96132212" z3="-3.96493921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47653832" y3="-2.1948599" z3="-0.30089212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44635951" y3="-2.98709532" z3="-1.0681883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00836717" y3="-2.5763843" z3="0.58549358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08848819" y3="-1.37369985" z3="-0.72004184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17148009" y3="-1.42455929" z3="-1.14622822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30628994" y3="-0.38406247" z3="-1.49436837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09558308" y3="-1.55098693" z3="-0.93914596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41106386" y3="-2.07857616" z3="-1.99825571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3411,.0519,-.1932;7.3873,.1694,.4153;6.6476,.4437,-.3431;4.728,1.2376,-2.2622;4.3886,.4357,-1.1847;2.729,.8447,-3.6625;3.6327,1.7485,-3.135;1.3794,2.5879,-4.6159;1.5609,1.2472,-4.3752;.5,2.9221,-5.1753;2.9269,-.4854,-3.4415;3.0988,.045,-1.0016;2.4011,-1.098,-2.0016;.9296,-.9653,-1.8297;3.1015,-2.4233,-1.8461;-.1453,-3.619,.6764;-.016,-5.2523,-4.7417;-.2447,-4.9964,-3.7036;-.8435,-4.3099,-1.0835;.7792,-4.5862,-2.8518;-1.5601,-5.0903,-3.2452;-1.8603,-4.7418,-1.9307;.4918,-4.2576,-1.5255;1.8119,-4.5028,-3.1989;-2.3587,-5.4052,-3.9207;-2.8968,-4.7832,-1.5868;-1.0338,-3.8622,.2375;-2.1743,-3.6475,.8815;-3.0623,-4.1088,.447;-2.1702,-3.5116,2.3484;-2.2303,-3.3231,5.146;-3.3678,-3.7118,3.0508;-1.0026,-3.2238,3.0709;-1.0299,-3.13,4.4593;-3.3968,-3.6198,4.4396;-4.2833,-3.9489,2.502;-.042,-3.0945,2.5673;-.1002,-2.9261,4.9981;-4.3358,-3.7874,4.974;-2.2514,-3.2578,6.2374;1.4113,-3.8908,-.6217;2.1713,-3.3887,-1.0749;.522,.2404,-4.7136;-3.0783,-1.7198,.0219;-2.9045,-.969,1.1837;-1.8432,-.3198,1.5198;-.3648,.5489,1.2251;-.4418,1.4557,-.3972;.9842,-.7112,1.3964;-.3457,1.7334,2.6762;-3.8816,-.9576,2.0793;-3.6556,-.3419,3.3374;-.2057,.7682,-1.2274;.3348,2.2433,-.3902;-1.4204,1.9427,-.5549;1.0144,-1.0787,2.4356;1.9577,-.2494,1.1577;.8569,-1.5509,.6942;-.4032,1.1887,3.6352;.5933,2.3164,2.6769;-1.1846,2.4504,2.6318;-2.7957,-.7985,3.853;-4.5724,-.5134,3.9172;-3.4825,.7399,3.2158;4.8422,-.7059,.9893;4.4189,-2.0339,.8505;3.7664,-2.6807,1.8928;3.5541,-1.9867,3.0804;4.03,-.6935,3.2758;4.6824,-.0602,2.2228;4.5265,-2.5325,-.1141;3.3723,-3.6901,1.7694;2.6908,-2.5866,4.1028;3.8448,-.1831,4.2214;5.0235,.9725,2.3385;-.7953,.4597,-4.2888;-1.7744,-.5088,-4.4676;-1.426,-1.7001,-5.0924;-.1393,-1.9298,-5.57;.8327,-.9583,-5.3701;-1.0404,1.3826,-3.7577;-2.7931,-.3637,-4.1068;-2.4373,-2.7497,-5.2328;.0922,-2.8699,-6.0719;1.8547,-1.1433,-5.7051;2.3591,-1.8926,5.0439;2.3146,-3.728,3.9336;-2.2135,-3.6512,-6.0121;-3.4395,-2.6648,-4.5513;7.0714,1.1659,-1.4917;6.1105,1.5545,-2.4702;8.4399,1.4958,-1.6893;8.8496,2.162,-2.8183;9.1663,1.1983,-.9267;9.9059,2.4049,-2.9622;6.5705,2.2247,-3.6378;7.902,2.5201,-3.807;5.8493,2.4973,-4.4118;8.2333,3.031,-4.7162;3.4001,3.1519,-3.3325;2.2843,3.5626,-4.1201;4.2064,4.164,-2.7389;3.9537,5.4965,-2.9626;5.0355,3.8763,-2.0906;4.5897,6.2529,-2.4941;2.0576,4.9481,-4.3457;2.8765,5.8983,-3.7876;1.2057,5.2445,-4.9656;2.6907,6.9613,-3.9649;-4.4765,-2.1949,-.3009;-4.4464,-2.9871,-1.0682;-5.0084,-2.5764,.5855;-5.0885,-1.3737,-.72;-2.1715,-1.4246,-1.1462;-2.3063,-.3841,-1.4944;-1.0956,-1.551,-.9391;-2.4111,-2.0786,-1.9983;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650425304202</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000999321339 0.000160674168 0.017037078803 0.005341965031</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030781686 -0.000280044 0.000120895 0.000138561 0.000213596 0.000258024 0.000374487 0.000440918 0.000577996 0.000818429 0.000885067 0.000959122 0.001193022 0.001208489 0.001419573 0.001506599 0.001551454 0.001723674 0.001772626 0.001920749 0.001967939 0.002242805 0.002383739 0.002533511 0.002678580 0.003024966 0.003042687 0.003114786 0.003569957 0.003854148 0.004407674 0.004671405 0.004788390 0.005105443 0.006003841 0.006103978 0.006303043 0.006676379 0.006874988 0.007573912 0.007971386 0.008225279 0.008416970 0.009445194 0.009540955 0.010039529 0.010110054 0.011161104 0.011909413 0.012230968 0.013006121 0.013156151 0.014376319 0.014879890 0.015429734 0.015828075 0.016013721 0.016611051 0.016800442 0.017543158 0.018260167 0.018851014 0.019324670 0.019648587 0.020203312 0.020728994 0.021251556 0.021407077 0.022123706 0.023104484 0.023698230 0.026529848 0.026903256 0.028101389 0.028296694 0.029605158 0.030528843 0.031642006 0.033239663 0.033740957 0.034167344 0.035775375 0.037186802 0.037423098 0.039413483 0.039871248 0.040211001 0.041128481 0.042594403 0.044728730 0.045760488 0.047169200 0.048047005 0.049287497 0.050516651 0.051088612 0.051313683 0.051814338 0.052494252 0.052814953 0.052966542 0.053269487 0.054861151 0.054992826 0.056240473 0.056418328 0.056602665 0.057069776 0.057243492 0.059232031 0.060656600 0.061080754 0.061905592 0.062417549 0.063437685 0.064542035 0.065331948 0.066154274 0.066619993 0.068546109 0.069296782 0.070295653 0.072809577 0.074531976 0.074807451 0.076539118 0.079248964 0.084570191 0.086974351 0.087266681 0.087760330 0.089787057 0.090714684 0.091588455 0.094314956 0.095111853 0.095929976 0.096507330 0.097871788 0.098857205 0.100238957 0.100854092 0.102448194 0.103231730 0.103667487 0.104396270 0.104605444 0.105330377 0.106377093 0.107111187 0.108264350 0.110147403 0.111224185 0.112526869 0.113574461 0.115159822 0.116295437 0.116875025 0.118780983 0.121392001 0.122553266 0.123871867 0.125523630 0.126275486 0.126422761 0.126808300 0.127873320 0.132194297 0.135149588 0.135946246 0.143186114 0.144114847 0.147104357 0.147657081 0.149836425 0.151852082 0.154696499 0.155050478 0.156751538 0.161355755 0.162016971 0.173830302 0.174480582 0.182190169 0.185586591 0.186588478 0.189705601 0.190451916 0.194500698 0.195849540 0.198989874 0.200435329 0.205256013 0.207206960 0.207566227 0.210303266 0.216862396 0.217440198 0.218009344 0.220410595 0.220903140 0.225440137 0.226789662 0.232426159 0.235215671 0.235754019 0.236124303 0.244776476 0.256141394 0.257383214 0.264017400 0.269984652 0.280792837 0.283900414 0.286403158 0.291998770 0.297071183 0.304588116 0.306040854 0.307381848 0.314667082 0.316838380 0.317459299 0.322271761 0.330207996 0.333028301 0.351847038 0.353060789 0.355438790 0.356042337 0.360108563 0.363123707 0.364621920 0.384187567 0.386065577 0.392252742 0.410667322 0.426130805 0.431296029 0.462525788 0.469544757 0.479209560 0.484631135 0.484691200 0.487592546 0.491501996 0.509875815 0.515609420 0.535422979 0.569522164 0.575415703 0.591546361 0.594305561 0.607452570 0.608469605 0.645043411 0.647997242 0.649895236 0.674522672 0.678495048 0.688258566 0.693526149 0.694148384 0.700415110 0.704894040 0.718569665 0.742315350 0.751455950 0.759477689 0.772209398 0.774828332 0.779775714 0.811045045 0.816581644 0.820238236 0.823229483 0.823766334 0.832420017 0.835094174 0.838173337 0.842763182 0.845970516 0.847755570 0.850257335 0.859877750 0.865965515 0.869160820 0.874748066 0.886566639 0.888941782 0.889906551 0.900916305 0.901134614 0.904245826 0.924241931 0.928319708 0.936737934 0.938246195 0.966409854 0.977428625 0.987455197 1.001892382 1.020402177 1.028852524 1.042676014 1.052886153 1.059012950 1.069264418 1.087044044 1.089135860 1.105401257 1.111945986 1.112993752 1.128809332 1.136561927 1.141285443 1.145603571 1.176867440 1.179216330 1.181885287 1.187658880 1.191674877 1.198696404 1.224824974 1.229080477 1.274981208 1.303100812 1.321437193 1.328500393 1.333493570 1.336735118 1.338196220 1.342363520 1.344722036 1.345433507 1.359963661 1.379729693 1.383536429 1.386197614 1.409044204 1.421291071 1.431551537 1.551520114 1.686949012 1.776810547</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">318</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34049105" y3="0.05488779" z3="-0.19407802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38635402" y3="0.1707539" z3="0.41635524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64760637" y3="0.44456277" z3="-0.34322174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73077787" y3="1.23890827" z3="-2.26505112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38939828" y3="0.43887132" z3="-1.18678221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73185617" y3="0.84782096" z3="-3.66576506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63721382" y3="1.75051201" z3="-3.13959043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38590632" y3="2.59217533" z3="-4.62266927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56465675" y3="1.25141211" z3="-4.37954018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50705098" y3="2.92727069" z3="-5.18225705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92663167" y3="-0.48219996" z3="-3.44280428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0988805" y3="0.05090604" z3="-1.00379252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40027212" y3="-1.09260421" z3="-2.00233751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92888215" y3="-0.95897699" z3="-1.83059321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09984509" y3="-2.41822101" z3="-1.84577725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14611584" y3="-3.62288885" z3="0.67969248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02123715" y3="-5.24062386" z3="-4.74389441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24860752" y3="-4.9890023" z3="-3.70442483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84391431" y3="-4.31285642" z3="-1.08067805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77578712" y3="-4.57758137" z3="-2.85353625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56301138" y3="-5.08878564" z3="-3.24346545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86149929" y3="-4.7456639" z3="-1.92711464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49028498" y3="-4.25424968" z3="-1.52540042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80694627" y3="-4.48828453" z3="-3.20279464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36114958" y3="-5.40523476" z3="-3.91813197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89657973" y3="-4.79293069" z3="-1.58090928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03360344" y3="-3.86846233" z3="0.24147867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17453254" y3="-3.65298941" z3="0.88514837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06245002" y3="-4.11543637" z3="0.45169012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16995321" y3="-3.51654975" z3="2.35219432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22883559" y3="-3.32689622" z3="5.1498138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36662791" y3="-3.71884944" z3="3.0552391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00264821" y3="-3.22584861" z3="3.07413762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02932422" y3="-3.13148582" z3="4.46256992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39517148" y3="-3.62620397" z3="4.44398541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28179285" y3="-3.95832441" z3="2.50684659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0424705" y3="-3.09484961" z3="2.57004402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10002995" y3="-2.9248372" z3="5.00096421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3340369" y3="-3.79450253" z3="4.97897644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24946662" y3="-3.26093261" z3="6.2412363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40988986" y3="-3.88607628" z3="-0.62248866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16909514" y3="-3.38297726" z3="-1.07575016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52391933" y3="0.24614343" z3="-4.71480659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07882248" y3="-1.72787018" z3="0.02433088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90878083" y3="-0.97629496" z3="1.18639835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84877442" y3="-0.32563422" z3="1.52461795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37140367" y3="0.54498049" z3="1.22884025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45193188" y3="1.45402083" z3="-0.39218932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97983163" y3="-0.71333661" z3="1.39561256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35233926" y3="1.72752003" z3="2.68154409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88796611" y3="-0.96589766" z3="2.0793832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66612225" y3="-0.34976118" z3="3.3380486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21172065" y3="0.76885572" z3="-1.22330155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32040664" y3="2.24584667" z3="-0.38357569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43309359" y3="1.93626327" z3="-0.54980384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01329692" y3="-1.0820853" z3="2.43423973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95109497" y3="-0.24870297" z3="1.15521099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85245835" y3="-1.55227551" z3="0.69232376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40804562" y3="1.1813098" z3="3.64004887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58558095" y3="2.31223257" z3="2.68163683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19246903" y3="2.44347147" z3="2.63896047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80713326" y3="-0.80580147" z3="3.85608825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58434049" y3="-0.5222961" z3="3.91473802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49444564" y3="0.73222787" z3="3.21666387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.840253" y3="-0.70167144" z3="0.98862406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4185033" y3="-2.03001388" z3="0.85058506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76580618" y3="-2.67690824" z3="1.89265353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55183955" y3="-1.98239498" z3="3.07944374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02629231" y3="-0.68862942" z3="3.27439563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67867688" y3="-0.05525696" z3="2.22128679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52607867" y3="-2.52849526" z3="-0.11459795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37201595" y3="-3.68669693" z3="1.76899731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68884944" y3="-2.58269632" z3="4.10182499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84058694" y3="-0.17810591" z3="4.22016287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01826237" y3="0.97765094" z3="2.33621721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79170904" y3="0.46585745" z3="-4.28578165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7716762" y3="-0.50197542" z3="-4.46049445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4253316" y3="-1.69313359" z3="-5.08837327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14066102" y3="-1.92319313" z3="-5.57094353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83241846" y3="-0.9521846" z3="-5.37290458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03514457" y3="1.3886962" z3="-3.75231971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78929946" y3="-0.35674747" z3="-4.09714126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43726583" y3="-2.74297412" z3="-5.22615469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08765973" y3="-2.86285905" z3="-6.07288924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85312427" y3="-1.13723095" z3="-5.71158239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.355417" y3="-1.88805315" z3="5.04243879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31568974" y3="-3.7250299" z3="3.93419528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21640442" y3="-3.64361753" z3="-6.00702577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43708393" y3="-2.65935565" z3="-4.54058781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07351955" y3="1.16548945" z3="-1.49212367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11427608" y3="1.55434998" z3="-2.47199717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44284164" y3="1.49429598" z3="-1.68865803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85449425" y3="2.15841479" z3="-2.81813266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16796612" y3="1.19657096" z3="-0.92498817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91140843" y3="2.40094576" z3="-2.96113333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5763229" y3="2.22231437" z3="-3.64036244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90823923" y3="2.51524945" z3="-3.80866443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85596226" y3="2.4933273" z3="-4.41575268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24089934" y3="3.02070556" z3="-4.71891235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40770016" y3="3.15411046" z3="-3.34010424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29307231" y3="3.56581959" z3="-4.12877393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2158454" y3="4.16594792" z3="-2.74827019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96646742" y3="5.49856865" z3="-2.97536032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04373821" y3="3.87812444" z3="-2.0984356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60369158" y3="6.25496458" z3="-2.50786912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06922907" y3="4.9517949" z3="-4.35723638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89064608" y3="5.90104478" z3="-3.80184815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21829878" y3="5.24870128" z3="-4.97818131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70764138" y3="6.96402588" z3="-3.98197629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47605999" y3="-2.20460605" z3="-0.3009308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44357698" y3="-2.99531095" z3="-1.06965957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00812928" y3="-2.58851257" z3="0.58432157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08905395" y3="-1.38367455" z3="-0.7191914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17071859" y3="-1.43035709" z3="-1.14230991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30546516" y3="-0.38899613" z3="-1.48916044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09525094" y3="-1.55588945" z3="-0.93358705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40820762" y3="-2.08340468" z3="-1.99530383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3405,.0549,-.1941;7.3864,.1708,.4164;6.6476,.4446,-.3432;4.7308,1.2389,-2.2651;4.3894,.4389,-1.1868;2.7319,.8478,-3.6658;3.6372,1.7505,-3.1396;1.3859,2.5922,-4.6227;1.5647,1.2514,-4.3795;.5071,2.9273,-5.1823;2.9266,-.4822,-3.4428;3.0989,.0509,-1.0038;2.4003,-1.0926,-2.0023;.9289,-.959,-1.8306;3.0998,-2.4182,-1.8458;-.1461,-3.6229,.6797;-.0212,-5.2406,-4.7439;-.2486,-4.989,-3.7044;-.8439,-4.3129,-1.0807;.7758,-4.5776,-2.8535;-1.563,-5.0888,-3.2435;-1.8615,-4.7457,-1.9271;.4903,-4.2542,-1.5254;1.8069,-4.4883,-3.2028;-2.3611,-5.4052,-3.9181;-2.8966,-4.7929,-1.5809;-1.0336,-3.8685,.2415;-2.1745,-3.653,.8851;-3.0625,-4.1154,.4517;-2.17,-3.5165,2.3522;-2.2288,-3.3269,5.1498;-3.3666,-3.7188,3.0552;-1.0026,-3.2258,3.0741;-1.0293,-3.1315,4.4626;-3.3952,-3.6262,4.444;-4.2818,-3.9583,2.5068;-.0425,-3.0948,2.57;-.1,-2.9248,5.001;-4.334,-3.7945,4.979;-2.2495,-3.2609,6.2412;1.4099,-3.8861,-.6225;2.1691,-3.383,-1.0758;.5239,.2461,-4.7148;-3.0788,-1.7279,.0243;-2.9088,-.9763,1.1864;-1.8488,-.3256,1.5246;-.3714,.545,1.2288;-.4519,1.454,-.3922;.9798,-.7133,1.3956;-.3523,1.7275,2.6815;-3.888,-.9659,2.0794;-3.6661,-.3498,3.338;-.2117,.7689,-1.2233;.3204,2.2458,-.3836;-1.4331,1.9363,-.5498;1.0133,-1.0821,2.4342;1.9511,-.2487,1.1552;.8525,-1.5523,.6923;-.408,1.1813,3.64;.5856,2.3122,2.6816;-1.1925,2.4435,2.639;-2.8071,-.8058,3.8561;-4.5843,-.5223,3.9147;-3.4944,.7322,3.2167;4.8403,-.7017,.9886;4.4185,-2.03,.8506;3.7658,-2.6769,1.8927;3.5518,-1.9824,3.0794;4.0263,-.6886,3.2744;4.6787,-.0553,2.2213;4.5261,-2.5285,-.1146;3.372,-3.6867,1.769;2.6888,-2.5827,4.1018;3.8406,-.1781,4.2202;5.0183,.9777,2.3362;-.7917,.4659,-4.2858;-1.7717,-.502,-4.4605;-1.4253,-1.6931,-5.0884;-.1407,-1.9232,-5.5709;.8324,-.9522,-5.3729;-1.0351,1.3887,-3.7523;-2.7893,-.3567,-4.0971;-2.4373,-2.743,-5.2262;.0877,-2.8629,-6.0729;1.8531,-1.1372,-5.7116;2.3554,-1.8881,5.0424;2.3157,-3.725,3.9342;-2.2164,-3.6436,-6.007;-3.4371,-2.6594,-4.5406;7.0735,1.1655,-1.4921;6.1143,1.5543,-2.472;8.4428,1.4943,-1.6887;8.8545,2.1584,-2.8181;9.168,1.1966,-.925;9.9114,2.4009,-2.9611;6.5763,2.2223,-3.6404;7.9082,2.5152,-3.8087;5.856,2.4933,-4.4158;8.2409,3.0207,-4.7189;3.4077,3.1541,-3.3401;2.2931,3.5658,-4.1288;4.2158,4.1659,-2.7483;3.9665,5.4986,-2.9754;5.0437,3.8781,-2.0984;4.6037,6.255,-2.5079;2.0692,4.9518,-4.3572;2.8906,5.901,-3.8018;1.2183,5.2487,-4.9782;2.7076,6.964,-3.982;-4.4761,-2.2046,-.3009;-4.4436,-2.9953,-1.0697;-5.0081,-2.5885,.5843;-5.0891,-1.3837,-.7192;-2.1707,-1.4304,-1.1423;-2.3055,-.389,-1.4892;-1.0953,-1.5559,-.9336;-2.4082,-2.0834,-1.9953;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423978141</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001217478735 0.000185636983 0.020413280967 0.005434637113</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030784225 -0.000224929 0.000083805 0.000125786 0.000221291 0.000254845 0.000372258 0.000439759 0.000575568 0.000815198 0.000883269 0.000958337 0.001179488 0.001205054 0.001425161 0.001510650 0.001554471 0.001727144 0.001774201 0.001921496 0.001958517 0.002242433 0.002380314 0.002534053 0.002681748 0.003028830 0.003045437 0.003112552 0.003573125 0.003853811 0.004403485 0.004671748 0.004790339 0.005107212 0.006004702 0.006099778 0.006302994 0.006675982 0.006869711 0.007573276 0.007970414 0.008225817 0.008418469 0.009444858 0.009527663 0.010033701 0.010109911 0.011164225 0.011909010 0.012231294 0.013006237 0.013156831 0.014376619 0.014880538 0.015434217 0.015828280 0.016013531 0.016607738 0.016801266 0.017544390 0.018260361 0.018851590 0.019325307 0.019651482 0.020202611 0.020726945 0.021251975 0.021404270 0.022123009 0.023110465 0.023698720 0.026546152 0.026903923 0.028120987 0.028317675 0.029610179 0.030530885 0.031647823 0.033239792 0.033741463 0.034167288 0.035775650 0.037188099 0.037426253 0.039411939 0.039874052 0.040211521 0.041131227 0.042594860 0.044729011 0.045771472 0.047171975 0.048049700 0.049287621 0.050516717 0.051088875 0.051313893 0.051818226 0.052495140 0.052816427 0.052967218 0.053269608 0.054861672 0.054993166 0.056243757 0.056421944 0.056606449 0.057070295 0.057244383 0.059235509 0.060656141 0.061082014 0.061908767 0.062417490 0.063437697 0.064542261 0.065334455 0.066165485 0.066621338 0.068558524 0.069302179 0.070296684 0.072814359 0.074539972 0.074807524 0.076539803 0.079262798 0.084570061 0.086977484 0.087278216 0.087762669 0.089790366 0.090717053 0.091604470 0.094315643 0.095123358 0.095933829 0.096507366 0.097872585 0.098857311 0.100240954 0.100854808 0.102449302 0.103231894 0.103672307 0.104409524 0.104606468 0.105347837 0.106377256 0.107112619 0.108266972 0.110152689 0.111224317 0.112530745 0.113574872 0.115168225 0.116296564 0.116875977 0.118781359 0.121392498 0.122553472 0.123871746 0.125529216 0.126279486 0.126423100 0.126809873 0.127882323 0.132194729 0.135150235 0.135952563 0.143190223 0.144118028 0.147105411 0.147656236 0.149841909 0.151864030 0.154697049 0.155062818 0.156754161 0.161355974 0.162021550 0.173829978 0.174480614 0.182210919 0.185593890 0.186589279 0.189707932 0.190456045 0.194501838 0.195850128 0.198996181 0.200437909 0.205265970 0.207207357 0.207567852 0.210303201 0.216866722 0.217451852 0.218010721 0.220488860 0.220904006 0.225440371 0.226794515 0.232426443 0.235216399 0.235755070 0.236124408 0.244781612 0.256141477 0.257385129 0.264018622 0.269984723 0.280793232 0.283913733 0.286406420 0.291999747 0.297076112 0.304591058 0.306041516 0.307381566 0.314679199 0.316838870 0.317459370 0.322271851 0.330217273 0.333054673 0.351847634 0.353061770 0.355454770 0.356051801 0.360108755 0.363131101 0.364621996 0.384187338 0.386069511 0.392255623 0.410684234 0.426131252 0.431297118 0.462527880 0.469577331 0.479210351 0.484631456 0.484701739 0.487599936 0.491503378 0.509900467 0.515615320 0.535425251 0.569542555 0.575416157 0.591550200 0.594306553 0.607458618 0.608484515 0.645043104 0.647999941 0.649900248 0.674528689 0.678501412 0.688267569 0.693533400 0.694155510 0.700414113 0.704906927 0.718579576 0.742325347 0.751456230 0.759480512 0.772210997 0.774828300 0.779788211 0.811045032 0.816585413 0.820249987 0.823247636 0.823766950 0.832425073 0.835094945 0.838184188 0.842767059 0.845971007 0.847756697 0.850258043 0.859881410 0.865965942 0.869165731 0.874752634 0.886591235 0.889013126 0.889906435 0.900916922 0.901136597 0.904260541 0.924246551 0.928319816 0.936770979 0.938249350 0.966409976 0.977436042 0.987456034 1.001903168 1.020404609 1.028852152 1.042682011 1.052914541 1.059051669 1.069266431 1.087047720 1.089153077 1.105429901 1.111955571 1.113014272 1.128958722 1.136566668 1.141292757 1.145635307 1.176877726 1.179216522 1.181893289 1.187666841 1.191675157 1.198718582 1.224849493 1.229081319 1.275012368 1.303101512 1.321439528 1.328506888 1.333498527 1.336738095 1.338200186 1.342362911 1.344736320 1.345447043 1.359967667 1.379732346 1.383535923 1.386200547 1.409045852 1.421317532 1.431582826 1.551520162 1.687002529 1.776849637</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">319</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33890248" y3="0.05881975" z3="-0.19533929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38454086" y3="0.1707945" z3="0.41563803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64669388" y3="0.44697487" z3="-0.34375203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73179843" y3="1.24369273" z3="-2.2667355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3886802" y3="0.44489429" z3="-1.18802637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73346838" y3="0.85334292" z3="-3.66849824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6395872" y3="1.75575799" z3="-3.14289515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39102701" y3="2.59743303" z3="-4.63056199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56743027" y3="1.25719633" z3="-4.38397021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51324109" y3="2.93238194" z3="-5.19195697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9264129" y3="-0.47668159" z3="-3.44344611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09746276" y3="0.05886222" z3="-1.00494149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39684726" y3="-1.0839991" z3="-2.00287071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92567033" y3="-0.94654972" z3="-1.83248634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09326063" y3="-2.41110987" z3="-1.84447865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14774681" y3="-3.62809394" z3="0.68405032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.02218116" y3="-5.23885606" z3="-4.74075826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24971493" y3="-4.98903773" z3="-3.70099325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8458628" y3="-4.31706186" z3="-1.07671532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77345134" y3="-4.57337273" z3="-2.85107274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56286073" y3="-5.09558287" z3="-3.23881177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86165611" y3="-4.75486845" z3="-1.92195802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48754876" y3="-4.25185958" z3="-1.52271409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80425428" y3="-4.47990869" z3="-3.20135764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36121471" y3="-5.41372987" z3="-3.91320238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89642676" y3="-4.80696757" z3="-1.57450653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03593667" y3="-3.8734129" z3="0.2456341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17657693" y3="-3.65785266" z3="0.88922544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06465201" y3="-4.1199819" z3="0.45571829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17204189" y3="-3.52009238" z3="2.35602438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23114453" y3="-3.32568902" z3="5.15327784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3687715" y3="-3.7213477" z3="3.0595404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00467556" y3="-3.22833603" z3="3.07736357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03143938" y3="-3.13161339" z3="4.46556114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39727906" y3="-3.62661313" z3="4.44810503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28414047" y3="-3.96134667" z3="2.51161703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0447279" y3="-3.09783462" z3="2.5729965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10165331" y3="-2.92451929" z3="5.0033442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33561793" y3="-3.79498112" z3="4.98342366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2518401" y3="-3.2578919" z3="6.24454445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40613538" y3="-3.87967231" z3="-0.6206078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16389004" y3="-3.37473671" z3="-1.0746251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52597848" y3="0.25150402" z3="-4.7184455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07853826" y3="-1.73234738" z3="0.0255994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91157761" y3="-0.98137052" z3="1.18850937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85294973" y3="-0.33042245" z3="1.53012562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37552084" y3="0.54063145" z3="1.23588078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45995682" y3="1.4568158" z3="-0.38085787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9769506" y3="-0.71747921" z3="1.39427572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35380564" y3="1.71511498" z3="2.69508283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89299177" y3="-0.97173413" z3="2.07942319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67465813" y3="-0.35387143" z3="3.33795088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21730714" y3="0.77584573" z3="-1.21479203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30912383" y3="2.25164393" z3="-0.36899456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44303548" y3="1.93544514" z3="-0.53632824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01487566" y3="-1.08704168" z3="2.43219621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94801704" y3="-0.25280825" z3="1.15051941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84801766" y3="-1.55621824" z3="0.69133192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40994711" y3="1.16293242" z3="3.64995169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58530426" y3="2.29792495" z3="2.69903471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19278432" y3="2.43250248" z3="2.65691224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.8154532" y3="-0.80656583" z3="3.85795075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59344629" y3="-0.52770328" z3="3.91403515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.5049632" y3="0.72830703" z3="3.21559993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83778665" y3="-0.69922613" z3="0.98621188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41698354" y3="-2.0278903" z3="0.84643937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76516711" y3="-2.67649488" z3="1.8880736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5511034" y3="-1.98355343" z3="3.0761641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0239288" y3="-0.68940665" z3="3.27229192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6755882" y3="-0.05425741" z3="2.21982059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52641801" y3="-2.52584264" z3="-0.11817284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37284989" y3="-3.68651008" z3="1.76368199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68876833" y3="-2.58568296" z3="4.09807725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83698126" y3="-0.17975482" z3="4.21793787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01462049" y3="0.97891083" z3="2.33627882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78905129" y3="0.4709044" z3="-4.2868362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76896139" y3="-0.49800913" z3="-4.46025578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42366092" y3="-1.68936185" z3="-5.08660696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1395461" y3="-1.91875864" z3="-5.57086821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83341997" y3="-0.94707984" z3="-5.3764917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03133496" y3="1.39396844" z3="-3.75474708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78567597" y3="-0.35310974" z3="-4.09396477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43537102" y3="-2.73938322" z3="-5.22115396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08967156" y3="-2.85870056" z3="-6.07432949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85368285" y3="-1.13179542" z3="-5.71683935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35488229" y3="-1.8925368" z3="5.03910782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31532755" y3="-3.72783436" z3="3.92846617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21597749" y3="-3.64004297" z3="-6.00276022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43325703" y3="-2.65580108" z3="-4.53342568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07399834" y3="1.16678852" z3="-1.49251176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11566707" y3="1.55565616" z3="-2.47340041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44365011" y3="1.49320269" z3="-1.68816782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85713416" y3="2.15564661" z3="-2.81781081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16789066" y3="1.19600215" z3="-0.92333275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91420874" y3="2.39585297" z3="-2.96017831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57966564" y3="2.22148197" z3="-3.64197732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91225816" y3="2.51316772" z3="-3.80930553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86083476" y3="2.49394536" z3="-4.41811061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24649786" y3="3.0212299" z3="-4.71917524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41259841" y3="3.15926027" z3="-3.34716334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2996781" y3="3.57068699" z3="-4.13840394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22233178" y3="4.1710721" z3="-2.75782054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97627052" y3="5.50345214" z3="-2.98954913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04913736" y3="3.88332913" z3="-2.10656586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61518762" y3="6.25946861" z3="-2.52461428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07964079" y3="4.95580309" z3="-4.37221445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90225685" y3="5.90554047" z3="-3.81850309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23007584" y3="5.25253093" z3="-4.99505361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72176947" y3="6.96833676" z3="-4.00238957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47445076" y3="-2.2095218" z3="-0.30412283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.43895664" y3="-3.00105577" z3="-1.07183767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.0100079" y3="-2.59263199" z3="0.57948453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.08547506" y3="-1.38900765" z3="-0.7257042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.16705008" y3="-1.4346597" z3="-1.13837334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30230405" y3="-0.39419253" z3="-1.48643414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09204416" y3="-1.5586538" z3="-0.92682024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40161827" y3="-2.08847031" z3="-1.99182613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3389,.0588,-.1953;7.3845,.1708,.4156;6.6467,.447,-.3438;4.7318,1.2437,-2.2667;4.3887,.4449,-1.188;2.7335,.8533,-3.6685;3.6396,1.7558,-3.1429;1.391,2.5974,-4.6306;1.5674,1.2572,-4.384;.5132,2.9324,-5.192;2.9264,-.4767,-3.4434;3.0975,.0589,-1.0049;2.3968,-1.084,-2.0029;.9257,-.9465,-1.8325;3.0933,-2.4111,-1.8445;-.1477,-3.6281,.6841;-.0222,-5.2389,-4.7408;-.2497,-4.989,-3.701;-.8459,-4.3171,-1.0767;.7735,-4.5734,-2.8511;-1.5629,-5.0956,-3.2388;-1.8617,-4.7549,-1.922;.4875,-4.2519,-1.5227;1.8043,-4.4799,-3.2014;-2.3612,-5.4137,-3.9132;-2.8964,-4.807,-1.5745;-1.0359,-3.8734,.2456;-2.1766,-3.6579,.8892;-3.0647,-4.12,.4557;-2.172,-3.5201,2.356;-2.2311,-3.3257,5.1533;-3.3688,-3.7213,3.0595;-1.0047,-3.2283,3.0774;-1.0314,-3.1316,4.4656;-3.3973,-3.6266,4.4481;-4.2841,-3.9613,2.5116;-.0447,-3.0978,2.573;-.1017,-2.9245,5.0033;-4.3356,-3.795,4.9834;-2.2518,-3.2579,6.2445;1.4061,-3.8797,-.6206;2.1639,-3.3747,-1.0746;.526,.2515,-4.7184;-3.0785,-1.7323,.0256;-2.9116,-.9814,1.1885;-1.8529,-.3304,1.5301;-.3755,.5406,1.2359;-.46,1.4568,-.3809;.977,-.7175,1.3943;-.3538,1.7151,2.6951;-3.893,-.9717,2.0794;-3.6747,-.3539,3.338;-.2173,.7758,-1.2148;.3091,2.2516,-.369;-1.443,1.9354,-.5363;1.0149,-1.087,2.4322;1.948,-.2528,1.1505;.848,-1.5562,.6913;-.4099,1.1629,3.65;.5853,2.2979,2.699;-1.1928,2.4325,2.6569;-2.8155,-.8066,3.858;-4.5934,-.5277,3.914;-3.505,.7283,3.2156;4.8378,-.6992,.9862;4.417,-2.0279,.8464;3.7652,-2.6765,1.8881;3.5511,-1.9836,3.0762;4.0239,-.6894,3.2723;4.6756,-.0543,2.2198;4.5264,-2.5258,-.1182;3.3728,-3.6865,1.7637;2.6888,-2.5857,4.0981;3.837,-.1798,4.2179;5.0146,.9789,2.3363;-.7891,.4709,-4.2868;-1.769,-.498,-4.4603;-1.4237,-1.6894,-5.0866;-.1395,-1.9188,-5.5709;.8334,-.9471,-5.3765;-1.0313,1.394,-3.7547;-2.7857,-.3531,-4.094;-2.4354,-2.7394,-5.2212;.0897,-2.8587,-6.0743;1.8537,-1.1318,-5.7168;2.3549,-1.8925,5.0391;2.3153,-3.7278,3.9285;-2.216,-3.64,-6.0028;-3.4333,-2.6558,-4.5334;7.074,1.1668,-1.4925;6.1157,1.5557,-2.4734;8.4437,1.4932,-1.6882;8.8571,2.1556,-2.8178;9.1679,1.196,-.9233;9.9142,2.3959,-2.9602;6.5797,2.2215,-3.642;7.9123,2.5132,-3.8093;5.8608,2.4939,-4.4181;8.2465,3.0212,-4.7192;3.4126,3.1593,-3.3472;2.2997,3.5707,-4.1384;4.2223,4.1711,-2.7578;3.9763,5.5035,-2.9895;5.0491,3.8833,-2.1066;4.6152,6.2595,-2.5246;2.0796,4.9558,-4.3722;2.9023,5.9055,-3.8185;1.2301,5.2525,-4.9951;2.7218,6.9683,-4.0024;-4.4745,-2.2095,-.3041;-4.439,-3.0011,-1.0718;-5.01,-2.5926,.5795;-5.0855,-1.389,-.7257;-2.1671,-1.4347,-1.1384;-2.3023,-.3942,-1.4864;-1.092,-1.5587,-.9268;-2.4016,-2.0885,-1.9918;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650418038156</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001375756454 0.000201761994 0.019663424649 0.005339684346</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030784954 -0.000187578 0.000106829 0.000179575 0.000219364 0.000255364 0.000371299 0.000443989 0.000578711 0.000815855 0.000889315 0.000958411 0.001187806 0.001208335 0.001432725 0.001513907 0.001557842 0.001725815 0.001777612 0.001921092 0.001958486 0.002242565 0.002379739 0.002534802 0.002682709 0.003031206 0.003047239 0.003112548 0.003581541 0.003856929 0.004403517 0.004671788 0.004790197 0.005108370 0.006004693 0.006100735 0.006305033 0.006676771 0.006871746 0.007573808 0.007970563 0.008227022 0.008418336 0.009444829 0.009528110 0.010033689 0.010109973 0.011167141 0.011909839 0.012231794 0.013005933 0.013157705 0.014376950 0.014880579 0.015436908 0.015830158 0.016014333 0.016612857 0.016801453 0.017544652 0.018260565 0.018851655 0.019325989 0.019652808 0.020202798 0.020726820 0.021252069 0.021404475 0.022122967 0.023117974 0.023698825 0.026559051 0.026904302 0.028129214 0.028335971 0.029615485 0.030531840 0.031650741 0.033239950 0.033741705 0.034167299 0.035775990 0.037188031 0.037429029 0.039411838 0.039876841 0.040211354 0.041133357 0.042595332 0.044729295 0.045775088 0.047177021 0.048051329 0.049287614 0.050516699 0.051088882 0.051314024 0.051826483 0.052495950 0.052818306 0.052967802 0.053269701 0.054863386 0.054993249 0.056244497 0.056422672 0.056609192 0.057070873 0.057245336 0.059237675 0.060656314 0.061083186 0.061909138 0.062417614 0.063438265 0.064542288 0.065337272 0.066172744 0.066622493 0.068562866 0.069305399 0.070299292 0.072816651 0.074546211 0.074807639 0.076540281 0.079273796 0.084570217 0.086981262 0.087286946 0.087763119 0.089792502 0.090719168 0.091617751 0.094316054 0.095134675 0.095936262 0.096507425 0.097873344 0.098857763 0.100242570 0.100854796 0.102449464 0.103231922 0.103677517 0.104418257 0.104608270 0.105353642 0.106377420 0.107112812 0.108268865 0.110156299 0.111224345 0.112532353 0.113575656 0.115171912 0.116297102 0.116877067 0.118781843 0.121392806 0.122553843 0.123872435 0.125529974 0.126281931 0.126423626 0.126811236 0.127884814 0.132197412 0.135150516 0.135953263 0.143193901 0.144120810 0.147108650 0.147657194 0.149846796 0.151876514 0.154697576 0.155069256 0.156755302 0.161355841 0.162026318 0.173829968 0.174480743 0.182225790 0.185594104 0.186589319 0.189707980 0.190455998 0.194502396 0.195850503 0.199000097 0.200438820 0.205267811 0.207207372 0.207568790 0.210303309 0.216868660 0.217455872 0.218011618 0.220560348 0.220905234 0.225440509 0.226798120 0.232427366 0.235217380 0.235757141 0.236124943 0.244785852 0.256142219 0.257385831 0.264020177 0.269984729 0.280793694 0.283919033 0.286408626 0.292000969 0.297080175 0.304591088 0.306041954 0.307385615 0.314684445 0.316839889 0.317459521 0.322272482 0.330224276 0.333074879 0.351848870 0.353062382 0.355460742 0.356061397 0.360108946 0.363138873 0.364622210 0.384190423 0.386069657 0.392256200 0.410696606 0.426133210 0.431297495 0.462529040 0.469590093 0.479210613 0.484632243 0.484710992 0.487609705 0.491503570 0.509916340 0.515615348 0.535425503 0.569555799 0.575416438 0.591556950 0.594306753 0.607473076 0.608488050 0.645043324 0.648003220 0.649900838 0.674530222 0.678504893 0.688276625 0.693533562 0.694163195 0.700414419 0.704923826 0.718589992 0.742332497 0.751456334 0.759483759 0.772211383 0.774829890 0.779799812 0.811045843 0.816595341 0.820265368 0.823271598 0.823766976 0.832430502 0.835095029 0.838187204 0.842768573 0.845971120 0.847756736 0.850258038 0.859881915 0.865966072 0.869167409 0.874761976 0.886610088 0.889046171 0.889906467 0.900917055 0.901136963 0.904276834 0.924247628 0.928321034 0.936802029 0.938249717 0.966409976 0.977436477 0.987456882 1.001909668 1.020405897 1.028852186 1.042691595 1.052930213 1.059073092 1.069271519 1.087050564 1.089166766 1.105461441 1.111960121 1.113028776 1.129099264 1.136567739 1.141302715 1.145646210 1.176885000 1.179217032 1.181901428 1.187672568 1.191675206 1.198730012 1.224883975 1.229083900 1.275018173 1.303106984 1.321444266 1.328516047 1.333500022 1.336747152 1.338203092 1.342363005 1.344738234 1.345447457 1.359977580 1.379737378 1.383537152 1.386219966 1.409060089 1.421327603 1.431588850 1.551520420 1.687034619 1.776900360</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">320</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33837219" y3="0.06243642" z3="-0.1933887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38452772" y3="0.17240837" z3="0.41726321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64683388" y3="0.44751441" z3="-0.34288136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73312914" y3="1.24391176" z3="-2.26724171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38868781" y3="0.44769526" z3="-1.18691341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73460838" y3="0.85370303" z3="-3.66868344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64207188" y3="1.75577607" z3="-3.14487476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39588537" y3="2.59793761" z3="-4.63593763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5697783" y3="1.25783235" z3="-4.3859644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51893596" y3="2.9332246" z3="-5.19839757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92511883" y3="-0.47608997" z3="-3.44094226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09692457" y3="0.06358655" z3="-1.00328159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39654495" y3="-1.08124058" z3="-1.99907601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92537626" y3="-0.94465524" z3="-1.82818969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09417046" y3="-2.4075735" z3="-1.83934187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14785096" y3="-3.62897991" z3="0.68279182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01997676" y3="-5.23048551" z3="-4.74516989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24791036" y3="-4.98210281" z3="-3.7050216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84466076" y3="-4.31491161" z3="-1.07947407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77529972" y3="-4.56860636" z3="-2.85363613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56157815" y3="-5.08851062" z3="-3.24380224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86081486" y3="-4.74995214" z3="-1.92638526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.48907646" y3="-4.24955411" z3="-1.52457666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80605327" y3="-4.4745244" z3="-3.20314346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35881994" y3="-5.40632512" z3="-3.91904489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89562247" y3="-4.80234841" z3="-1.57959691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03512436" y3="-3.87445383" z3="0.24387697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17626819" y3="-3.66049732" z3="0.88756861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06398904" y3="-4.12267367" z3="0.45329427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17172222" y3="-3.52609962" z3="2.35472203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22999423" y3="-3.34068791" z3="5.15251597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36759451" y3="-3.73289156" z3="3.05788401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.0050325" y3="-3.23260048" z3="3.0765189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03141126" y3="-3.14031603" z3="4.46505195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39581413" y3="-3.64245252" z3="4.44676052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28218874" y3="-3.97432421" z3="2.50948936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0456074" y3="-3.09736011" z3="2.57209845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10254502" y3="-2.93116247" z3="5.00321545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3338184" y3="-3.81464454" z3="4.98191055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2503724" y3="-3.27641888" z3="6.24401514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40725373" y3="-3.87967174" z3="-0.62097854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16563469" y3="-3.37325677" z3="-1.0730733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52686906" y3="0.25354276" z3="-4.71790945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0806715" y3="-1.73444055" z3="0.02923811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91362126" y3="-0.98540249" z3="1.19335092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85552784" y3="-0.33339828" z3="1.53489988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38071673" y3="0.54156187" z3="1.23953135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46794274" y3="1.45778543" z3="-0.3771123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9739646" y3="-0.7139781" z3="1.39646655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36049795" y3="1.71659327" z3="2.69830164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89391855" y3="-0.97941058" z3="2.0851317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67520261" y3="-0.36556202" z3="3.34536883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22241408" y3="0.77796236" z3="-1.21105464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29822376" y3="2.2555311" z3="-0.36486494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45270548" y3="1.93301112" z3="-0.53291549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01127728" y3="-1.08702598" z3="2.43362481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94362244" y3="-0.24624284" z3="1.15538217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84632318" y3="-1.55036384" z3="0.6902161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4123768" y3="1.16522588" z3="3.65393795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57615695" y3="2.30335563" z3="2.69912051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20240768" y3="2.4306803" z3="2.66192452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.8150779" y3="-0.81980563" z3="3.86293636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59328398" y3="-0.54269681" z3="3.92088004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50694679" y3="0.71739232" z3="3.22673644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83630815" y3="-0.69286488" z3="0.98945974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41882286" y3="-2.02270806" z3="0.85262782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76650244" y3="-2.67016475" z3="1.89459419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54827093" y3="-1.97454784" z3="3.07985948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0178717" y3="-0.67876151" z3="3.27352195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67014566" y3="-0.04490161" z3="2.22069465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52985203" y3="-2.52238585" z3="-0.11145962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37646054" y3="-3.68147132" z3="1.77205017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68562198" y3="-2.57621113" z3="4.10171009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8287176" y3="-0.16735172" z3="4.21813117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00658573" y3="0.98921905" z3="2.33482317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78735527" y3="0.4745747" z3="-4.28530818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.76858979" y3="-0.49274225" z3="-4.45642843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42503074" y3="-1.68446509" z3="-5.08450996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14186347" y3="-1.91579758" z3="-5.57072052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83260526" y3="-0.94549784" z3="-5.37599138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02835895" y3="1.39806582" z3="-3.75205654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78506876" y3="-0.34651487" z3="-4.09015638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43829994" y3="-2.73336232" z3="-5.21968809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08442438" y3="-2.85583895" z3="-6.0730605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85218943" y3="-1.13160575" z3="-5.71752924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34664124" y3="-1.88056481" z3="5.03954133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31804174" y3="-3.72067755" z3="3.93623112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22059659" y3="-3.63354837" z3="-6.001931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43598341" y3="-2.64916077" z3="-4.53128785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07540101" y3="1.16426542" z3="-1.49326067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11784087" y3="1.55371681" z3="-2.47454822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44585049" y3="1.48745256" z3="-1.69014942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86040701" y3="2.14695599" z3="-2.82135776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16949691" y3="1.18936346" z3="-0.92524203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91819131" y3="2.3852799" z3="-2.96459624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58288848" y3="2.2162996" z3="-3.64482253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91594373" y3="2.50418508" z3="-3.81340063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86402606" y3="2.48751856" z3="-4.42148842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25082236" y3="3.00605125" z3="-4.72505983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41791611" y3="3.15912558" z3="-3.35311368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30622655" y3="3.57071877" z3="-4.14604265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22917818" y3="4.17111261" z3="-2.76594269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98592957" y3="5.50340552" z3="-3.00170159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05473773" y3="3.88378062" z3="-2.1129253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62568885" y3="6.25986255" z3="-2.53793519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08876011" y3="4.95613176" z3="-4.38346137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.91338531" y3="5.90534069" z3="-3.83266783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24022127" y3="5.25282707" z3="-5.00776415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.7354222" y3="6.96797398" z3="-4.01995299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47669839" y3="-2.21246774" z3="-0.29934561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44183221" y3="-3.00078938" z3="-1.07032122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00924797" y3="-2.59980849" z3="0.58404808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09052187" y3="-1.39138998" z3="-0.71609998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17109892" y3="-1.43332911" z3="-1.13534654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30797023" y3="-0.39213098" z3="-1.48154553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09565632" y3="-1.55637117" z3="-0.92483776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40525194" y3="-2.08609861" z3="-1.98942561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3384,.0624,-.1934;7.3845,.1724,.4173;6.6468,.4475,-.3429;4.7331,1.2439,-2.2672;4.3887,.4477,-1.1869;2.7346,.8537,-3.6687;3.6421,1.7558,-3.1449;1.3959,2.5979,-4.6359;1.5698,1.2578,-4.386;.5189,2.9332,-5.1984;2.9251,-.4761,-3.4409;3.0969,.0636,-1.0033;2.3965,-1.0812,-1.9991;.9254,-.9447,-1.8282;3.0942,-2.4076,-1.8393;-.1479,-3.629,.6828;-.02,-5.2305,-4.7452;-.2479,-4.9821,-3.705;-.8447,-4.3149,-1.0795;.7753,-4.5686,-2.8536;-1.5616,-5.0885,-3.2438;-1.8608,-4.75,-1.9264;.4891,-4.2496,-1.5246;1.8061,-4.4745,-3.2031;-2.3588,-5.4063,-3.919;-2.8956,-4.8023,-1.5796;-1.0351,-3.8745,.2439;-2.1763,-3.6605,.8876;-3.064,-4.1227,.4533;-2.1717,-3.5261,2.3547;-2.23,-3.3407,5.1525;-3.3676,-3.7329,3.0579;-1.005,-3.2326,3.0765;-1.0314,-3.1403,4.4651;-3.3958,-3.6425,4.4468;-4.2822,-3.9743,2.5095;-.0456,-3.0974,2.5721;-.1025,-2.9312,5.0032;-4.3338,-3.8146,4.9819;-2.2504,-3.2764,6.244;1.4073,-3.8797,-.621;2.1656,-3.3733,-1.0731;.5269,.2535,-4.7179;-3.0807,-1.7344,.0292;-2.9136,-.9854,1.1934;-1.8555,-.3334,1.5349;-.3807,.5416,1.2395;-.4679,1.4578,-.3771;.974,-.714,1.3965;-.3605,1.7166,2.6983;-3.8939,-.9794,2.0851;-3.6752,-.3656,3.3454;-.2224,.778,-1.2111;.2982,2.2555,-.3649;-1.4527,1.933,-.5329;1.0113,-1.087,2.4336;1.9436,-.2462,1.1554;.8463,-1.5504,.6902;-.4124,1.1652,3.6539;.5762,2.3034,2.6991;-1.2024,2.4307,2.6619;-2.8151,-.8198,3.8629;-4.5933,-.5427,3.9209;-3.5069,.7174,3.2267;4.8363,-.6929,.9895;4.4188,-2.0227,.8526;3.7665,-2.6702,1.8946;3.5483,-1.9745,3.0799;4.0179,-.6788,3.2735;4.6701,-.0449,2.2207;4.5299,-2.5224,-.1115;3.3765,-3.6815,1.7721;2.6856,-2.5762,4.1017;3.8287,-.1674,4.2181;5.0066,.9892,2.3348;-.7874,.4746,-4.2853;-1.7686,-.4927,-4.4564;-1.425,-1.6845,-5.0845;-.1419,-1.9158,-5.5707;.8326,-.9455,-5.376;-1.0284,1.3981,-3.7521;-2.7851,-.3465,-4.0902;-2.4383,-2.7334,-5.2197;.0844,-2.8558,-6.0731;1.8522,-1.1316,-5.7175;2.3466,-1.8806,5.0395;2.318,-3.7207,3.9362;-2.2206,-3.6335,-6.0019;-3.436,-2.6492,-4.5313;7.0754,1.1643,-1.4933;6.1178,1.5537,-2.4745;8.4459,1.4875,-1.6901;8.8604,2.147,-2.8214;9.1695,1.1894,-.9252;9.9182,2.3853,-2.9646;6.5829,2.2163,-3.6448;7.9159,2.5042,-3.8134;5.864,2.4875,-4.4215;8.2508,3.0061,-4.7251;3.4179,3.1591,-3.3531;2.3062,3.5707,-4.146;4.2292,4.1711,-2.7659;3.9859,5.5034,-3.0017;5.0547,3.8838,-2.1129;4.6257,6.2599,-2.5379;2.0888,4.9561,-4.3835;2.9134,5.9053,-3.8327;1.2402,5.2528,-5.0078;2.7354,6.968,-4.02;-4.4767,-2.2125,-.2993;-4.4418,-3.0008,-1.0703;-5.0092,-2.5998,.584;-5.0905,-1.3914,-.7161;-2.1711,-1.4333,-1.1353;-2.308,-.3921,-1.4815;-1.0957,-1.5564,-.9248;-2.4053,-2.0861,-1.9894;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420948088</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000967187336 0.000151267818 0.019590885060 0.005200287113</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030785735 -0.000268722 0.000082403 0.000155038 0.000245460 0.000252003 0.000413808 0.000427818 0.000579291 0.000814315 0.000891754 0.000938391 0.001151454 0.001201969 0.001444285 0.001498907 0.001559465 0.001713686 0.001756006 0.001922995 0.001953950 0.002239271 0.002368363 0.002538616 0.002680262 0.003029467 0.003038069 0.003089427 0.003597026 0.003869652 0.004401990 0.004671480 0.004787131 0.005103761 0.006004787 0.006098956 0.006305360 0.006675944 0.006875135 0.007559748 0.007968453 0.008228314 0.008415329 0.009438902 0.009527130 0.010033170 0.010107752 0.011171963 0.011909172 0.012227848 0.013006600 0.013158961 0.014377495 0.014881100 0.015430630 0.015828513 0.016009836 0.016614779 0.016797249 0.017514103 0.018257672 0.018852627 0.019231612 0.019651105 0.020200152 0.020703616 0.021248114 0.021401951 0.021986818 0.023112179 0.023614261 0.026562859 0.026905683 0.028133096 0.028356469 0.029620679 0.030533635 0.031647672 0.033239087 0.033743761 0.034164986 0.035769203 0.037164402 0.037350889 0.039241798 0.039732552 0.040192926 0.041133954 0.042596328 0.044725475 0.045779678 0.047180920 0.048052291 0.049287107 0.050516958 0.051089121 0.051313850 0.051829350 0.052497168 0.052820996 0.052968147 0.053270138 0.054864344 0.054993086 0.056248298 0.056424893 0.056611352 0.057071212 0.057246216 0.059239861 0.060656485 0.061084534 0.061909435 0.062418371 0.063439506 0.064542413 0.065338530 0.066182783 0.066625056 0.068562387 0.069308203 0.070300939 0.072820242 0.074532176 0.074805867 0.076540395 0.079291542 0.084570128 0.086989301 0.087297534 0.087762864 0.089799217 0.090720427 0.091623179 0.094317737 0.095145078 0.095941080 0.096506637 0.097874662 0.098860092 0.100244482 0.100854861 0.102450262 0.103231013 0.103682086 0.104433524 0.104611051 0.105367525 0.106374978 0.107113438 0.108261543 0.110159727 0.111224422 0.112540490 0.113563118 0.115163971 0.116297234 0.116874015 0.118781498 0.121392986 0.122555689 0.123873166 0.125527926 0.126285868 0.126428470 0.126815924 0.127890992 0.132200571 0.135147773 0.135953156 0.143198077 0.144124107 0.147114996 0.147633464 0.149844383 0.151793133 0.154697754 0.154989950 0.156756187 0.161343695 0.162029425 0.173829472 0.174480182 0.182241395 0.185597958 0.186586978 0.189709007 0.190456717 0.194506274 0.195851373 0.199006718 0.200439704 0.205263199 0.207207515 0.207567326 0.210303295 0.216869634 0.217461876 0.218011221 0.220638429 0.220906438 0.225440453 0.226801328 0.232427621 0.235219587 0.235758066 0.236124792 0.244789919 0.256143116 0.257386818 0.264020131 0.269981115 0.280793464 0.283927223 0.286410373 0.291996825 0.297084394 0.304592643 0.306042265 0.307385215 0.314672282 0.316839183 0.317459810 0.322272502 0.330215245 0.333094922 0.351838373 0.353064023 0.355468336 0.356064860 0.360108339 0.363144773 0.364622128 0.384136651 0.386069637 0.392252219 0.410687721 0.426132681 0.431292708 0.462530590 0.469586413 0.479211777 0.484631746 0.484718019 0.487589794 0.491503688 0.509922183 0.515582559 0.535395968 0.569554122 0.575407916 0.591495698 0.594306557 0.607481588 0.608496073 0.645039163 0.648008380 0.649896478 0.674530537 0.678488229 0.688280835 0.693534612 0.694174807 0.700411746 0.704938118 0.718590300 0.742331263 0.751455720 0.759482898 0.772212181 0.774832402 0.779807685 0.811045839 0.816609893 0.820273472 0.823286642 0.823766951 0.832435018 0.835096166 0.838192038 0.842770044 0.845971237 0.847756949 0.850256113 0.859882882 0.865966853 0.869170739 0.874765353 0.886621660 0.889086919 0.889907399 0.900916084 0.901137442 0.904287950 0.924248315 0.928320449 0.936824644 0.938250008 0.966409177 0.977442211 0.987457090 1.001915920 1.020407545 1.028852777 1.042701568 1.052940386 1.059092453 1.069276727 1.087051979 1.089173258 1.105482527 1.111971864 1.113040386 1.129196354 1.136570040 1.141309978 1.145658502 1.176889884 1.179217053 1.181903648 1.187679859 1.191674629 1.198738631 1.224902413 1.229081548 1.275025435 1.303107529 1.321446233 1.328519809 1.333499946 1.336753730 1.338123570 1.342231454 1.344741903 1.345450911 1.359981851 1.379743767 1.383538009 1.386223706 1.408153515 1.421333206 1.431290224 1.551520137 1.687058337 1.776926215</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">321</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34043348" y3="0.06325247" z3="-0.19370969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38771212" y3="0.16780106" z3="0.41353109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64984665" y3="0.44445505" z3="-0.34569108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73547195" y3="1.24288853" z3="-2.26846993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39060126" y3="0.44933878" z3="-1.18659707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73436151" y3="0.85500917" z3="-3.6666177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64405517" y3="1.75589207" z3="-3.14491077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39671387" y3="2.60081514" z3="-4.63235981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56905789" y3="1.26069053" z3="-4.38210306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51947535" y3="2.93707783" z3="-5.19382368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92335928" y3="-0.47490442" z3="-3.43828828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09830239" y3="0.06782805" z3="-1.00149298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39664075" y3="-1.07808252" z3="-1.99499058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92564148" y3="-0.94145786" z3="-1.82253161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09472855" y3="-2.40411187" z3="-1.83458012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14648491" y3="-3.62925664" z3="0.68047134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01293844" y3="-5.2255028" z3="-4.74752695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24217195" y3="-4.97843838" z3="-3.70746232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84263232" y3="-4.31371807" z3="-1.08240233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7798106" y3="-4.56569091" z3="-2.85453828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55630472" y3="-5.08541876" z3="-3.24798953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85733087" y3="-4.74828082" z3="-1.93072176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49173901" y3="-4.24798464" z3="-1.52571552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81113945" y3="-4.47173557" z3="-3.20275679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35329326" y3="-5.40183201" z3="-3.92458509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89267513" y3="-4.80063594" z3="-1.58545904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03419255" y3="-3.87420671" z3="0.24103777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.1752945" y3="-3.66378259" z3="0.88537896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06199712" y3="-4.12726875" z3="0.45074645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17050688" y3="-3.53049298" z3="2.35261724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22860491" y3="-3.34758936" z3="5.15066539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36512737" y3="-3.74299373" z3="3.05628429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.004718" y3="-3.23239809" z3="3.0740785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03104437" y3="-3.14135162" z3="4.4627012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39307412" y3="-3.65415694" z3="4.44530086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27932083" y3="-3.98739583" z3="2.50810544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04636206" y3="-3.09158186" z3="2.56919288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10262398" y3="-2.92875564" z3="5.00070568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32972964" y3="-3.83161391" z3="4.98076068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24872618" y3="-3.28459027" z3="6.24225484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40837424" y3="-3.8789259" z3="-0.6205213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16632623" y3="-3.37062513" z3="-1.07087446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52504063" y3="0.2568805" z3="-4.714121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08324509" y3="-1.73807048" z3="0.02801167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91645087" y3="-0.99074159" z3="1.19323181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85865089" y3="-0.33823227" z3="1.53518143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38707644" y3="0.54266825" z3="1.24025002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47626408" y3="1.45723158" z3="-0.37726613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97214171" y3="-0.70815073" z3="1.39973855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37381319" y3="1.71936616" z3="2.69770618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89631727" y3="-0.98731306" z3="2.08588656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.67741883" y3="-0.37482178" z3="3.3469425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22605551" y3="0.77777196" z3="-1.21013441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.28550723" y3="2.25905931" z3="-0.36434705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4632666" y3="1.92705354" z3="-0.53506074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01216649" y3="-1.07481973" z3="2.43830068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94123315" y3="-0.2404557" z3="1.15388826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84588997" y3="-1.54902712" z3="0.69895849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42353041" y3="1.1684313" z3="3.65366838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55940907" y3="2.31154576" z3="2.69925203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21984594" y3="2.42849246" z3="2.65931532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.81589461" y3="-0.82757357" z3="3.86313633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.59465809" y3="-0.55427918" z3="3.92379615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.51148516" y3="0.70851785" z3="3.22956729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83712415" y3="-0.68868613" z3="0.99077935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41896509" y3="-2.01874772" z3="0.85719074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76643955" y3="-2.66298656" z3="1.90105528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54844236" y3="-1.96398896" z3="3.08494066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01741513" y3="-0.66755295" z3="3.27468134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67029204" y3="-0.03701988" z3="2.22019812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53175628" y3="-2.52165331" z3="-0.10441937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37696831" y3="-3.67475097" z3="1.78168486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68585701" y3="-2.56300549" z3="4.10843055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82679495" y3="-0.15281481" z3="4.21677507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.0067378" y3="0.99746917" z3="2.33146172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78907212" y3="0.47937428" z3="-4.28126452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7712966" y3="-0.48735646" z3="-4.45377715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4291563" y3="-1.67937855" z3="-5.0808555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14587061" y3="-1.91200808" z3="-5.56571116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82948181" y3="-0.94274088" z3="-5.37166061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02891363" y3="1.40327135" z3="-3.74927413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78744535" y3="-0.3399789" z3="-4.08675608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44327196" y3="-2.72681568" z3="-5.21616909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0805322" y3="-2.85254098" z3="-6.06915318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8491337" y3="-1.1300292" z3="-5.71252104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34321381" y3="-1.86388208" z3="5.04199822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32113133" y3="-3.70917921" z3="3.94732396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22751583" y3="-3.62517493" z3="-6.00135608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43942298" y3="-2.64344952" z3="-4.52570219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07870174" y3="1.15809105" z3="-1.4979136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12045169" y3="1.54829333" z3="-2.47836115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44987924" y3="1.47666721" z3="-1.69769428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86454136" y3="2.13212676" z3="-2.83089312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17423544" y3="1.17835642" z3="-0.93338624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92273985" y3="2.36568902" z3="-2.97664272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58549267" y3="2.20762611" z3="-3.65022765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91936165" y3="2.4909918" z3="-3.82166295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86637528" y3="2.48093693" z3="-4.42582279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25440018" y3="2.99300431" z3="-4.73428444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42167732" y3="3.15953387" z3="-3.3531022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30916615" y3="3.57251499" z3="-4.14408386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.23583975" y3="4.17019418" z3="-2.76782669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99440746" y3="5.50273586" z3="-3.00341707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06242181" y3="3.88131448" z3="-2.11678602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63656276" y3="6.25796535" z3="-2.54150414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09382655" y3="4.95787406" z3="-4.38175229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.92072444" y3="5.90618515" z3="-3.83217372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24457933" y3="5.25586618" z3="-5.00442178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74401916" y3="6.96906505" z3="-4.01923661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47834975" y3="-2.21818863" z3="-0.30066992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44235082" y3="-3.00641203" z3="-1.07182027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01051082" y3="-2.60658243" z3="0.58274215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09297615" y3="-1.39776106" z3="-0.71717523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1739393" y3="-1.43473175" z3="-1.13622952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31334021" y3="-0.39390188" z3="-1.4818424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09829493" y3="-1.55563397" z3="-0.92571003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.40735103" y3="-2.08732902" z3="-1.99105565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3404,.0633,-.1937;7.3877,.1678,.4135;6.6498,.4445,-.3457;4.7355,1.2429,-2.2685;4.3906,.4493,-1.1866;2.7344,.855,-3.6666;3.6441,1.7559,-3.1449;1.3967,2.6008,-4.6324;1.5691,1.2607,-4.3821;.5195,2.9371,-5.1938;2.9234,-.4749,-3.4383;3.0983,.0678,-1.0015;2.3966,-1.0781,-1.995;.9256,-.9415,-1.8225;3.0947,-2.4041,-1.8346;-.1465,-3.6293,.6805;-.0129,-5.2255,-4.7475;-.2422,-4.9784,-3.7075;-.8426,-4.3137,-1.0824;.7798,-4.5657,-2.8545;-1.5563,-5.0854,-3.248;-1.8573,-4.7483,-1.9307;.4917,-4.248,-1.5257;1.8111,-4.4717,-3.2028;-2.3533,-5.4018,-3.9246;-2.8927,-4.8006,-1.5855;-1.0342,-3.8742,.241;-2.1753,-3.6638,.8854;-3.062,-4.1273,.4507;-2.1705,-3.5305,2.3526;-2.2286,-3.3476,5.1507;-3.3651,-3.743,3.0563;-1.0047,-3.2324,3.0741;-1.031,-3.1414,4.4627;-3.3931,-3.6542,4.4453;-4.2793,-3.9874,2.5081;-.0464,-3.0916,2.5692;-.1026,-2.9288,5.0007;-4.3297,-3.8316,4.9808;-2.2487,-3.2846,6.2423;1.4084,-3.8789,-.6205;2.1663,-3.3706,-1.0709;.525,.2569,-4.7141;-3.0832,-1.7381,.028;-2.9165,-.9907,1.1932;-1.8587,-.3382,1.5352;-.3871,.5427,1.2403;-.4763,1.4572,-.3773;.9721,-.7082,1.3997;-.3738,1.7194,2.6977;-3.8963,-.9873,2.0859;-3.6774,-.3748,3.3469;-.2261,.7778,-1.2101;.2855,2.2591,-.3643;-1.4633,1.9271,-.5351;1.0122,-1.0748,2.4383;1.9412,-.2405,1.1539;.8459,-1.549,.699;-.4235,1.1684,3.6537;.5594,2.3115,2.6993;-1.2198,2.4285,2.6593;-2.8159,-.8276,3.8631;-4.5947,-.5543,3.9238;-3.5115,.7085,3.2296;4.8371,-.6887,.9908;4.419,-2.0187,.8572;3.7664,-2.663,1.9011;3.5484,-1.964,3.0849;4.0174,-.6676,3.2747;4.6703,-.037,2.2202;4.5318,-2.5217,-.1044;3.377,-3.6748,1.7817;2.6859,-2.563,4.1084;3.8268,-.1528,4.2168;5.0067,.9975,2.3315;-.7891,.4794,-4.2813;-1.7713,-.4874,-4.4538;-1.4292,-1.6794,-5.0809;-.1459,-1.912,-5.5657;.8295,-.9427,-5.3717;-1.0289,1.4033,-3.7493;-2.7874,-.34,-4.0868;-2.4433,-2.7268,-5.2162;.0805,-2.8525,-6.0692;1.8491,-1.13,-5.7125;2.3432,-1.8639,5.042;2.3211,-3.7092,3.9473;-2.2275,-3.6252,-6.0014;-3.4394,-2.6434,-4.5257;7.0787,1.1581,-1.4979;6.1205,1.5483,-2.4784;8.4499,1.4767,-1.6977;8.8645,2.1321,-2.8309;9.1742,1.1784,-.9334;9.9227,2.3657,-2.9766;6.5855,2.2076,-3.6502;7.9194,2.491,-3.8217;5.8664,2.4809,-4.4258;8.2544,2.993,-4.7343;3.4217,3.1595,-3.3531;2.3092,3.5725,-4.1441;4.2358,4.1702,-2.7678;3.9944,5.5027,-3.0034;5.0624,3.8813,-2.1168;4.6366,6.258,-2.5415;2.0938,4.9579,-4.3818;2.9207,5.9062,-3.8322;1.2446,5.2559,-5.0044;2.744,6.9691,-4.0192;-4.4783,-2.2182,-.3007;-4.4424,-3.0064,-1.0718;-5.0105,-2.6066,.5827;-5.093,-1.3978,-.7172;-2.1739,-1.4347,-1.1362;-2.3133,-.3939,-1.4818;-1.0983,-1.5556,-.9257;-2.4074,-2.0873,-1.9911;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650419107184</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001085646074 0.000167391136 0.018217176752 0.005347546422</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030785995 -0.000109279 0.000098069 0.000151518 0.000234780 0.000253761 0.000348955 0.000438874 0.000588766 0.000814311 0.000896185 0.000928055 0.001059147 0.001201453 0.001447270 0.001499575 0.001567933 0.001718808 0.001753111 0.001929501 0.001952684 0.002222363 0.002361021 0.002534861 0.002678783 0.002998422 0.003039299 0.003088842 0.003623136 0.003875478 0.004400851 0.004671179 0.004787460 0.005096804 0.006004359 0.006085011 0.006300117 0.006677580 0.006880544 0.007557330 0.007967520 0.008230264 0.008416331 0.009430602 0.009494147 0.010029324 0.010107864 0.011175226 0.011908917 0.012227274 0.013006842 0.013158468 0.014370831 0.014878128 0.015410959 0.015824830 0.015991370 0.016552240 0.016792223 0.017488669 0.018244363 0.018852611 0.019128126 0.019651264 0.020191555 0.020650525 0.021239200 0.021395104 0.021852594 0.023064742 0.023535016 0.026589169 0.026906320 0.028135972 0.028364923 0.029626204 0.030535223 0.031647990 0.033240811 0.033746001 0.034166125 0.035761423 0.037124979 0.037322835 0.039005222 0.039701314 0.040189730 0.041136661 0.042595492 0.044725632 0.045786343 0.047184421 0.048057226 0.049287203 0.050521338 0.051089142 0.051313927 0.051830885 0.052498987 0.052821537 0.052968244 0.053270015 0.054870348 0.054993699 0.056251291 0.056426299 0.056614002 0.057072795 0.057246382 0.059240586 0.060657083 0.061084081 0.061910151 0.062416290 0.063443142 0.064541969 0.065333947 0.066177365 0.066623499 0.068567589 0.069308470 0.070294019 0.072826461 0.074522003 0.074806354 0.076537377 0.079304633 0.084570487 0.086994485 0.087299110 0.087761356 0.089801579 0.090718871 0.091646971 0.094319546 0.095162042 0.095939509 0.096507260 0.097876176 0.098855834 0.100244916 0.100855763 0.102451021 0.103231729 0.103685072 0.104438802 0.104612384 0.105363403 0.106378528 0.107115461 0.108263082 0.110159688 0.111221719 0.112544732 0.113564039 0.115155511 0.116298299 0.116877538 0.118781638 0.121393118 0.122556057 0.123871789 0.125530032 0.126294422 0.126430212 0.126815815 0.127888990 0.132202498 0.135148068 0.135953000 0.143194433 0.144124840 0.147125170 0.147623660 0.149836657 0.151617074 0.154695443 0.154940445 0.156754954 0.161327095 0.162029317 0.173830802 0.174483006 0.182239358 0.185597967 0.186579858 0.189710482 0.190456134 0.194509467 0.195850491 0.199010375 0.200440487 0.205260430 0.207207862 0.207567758 0.210303373 0.216869589 0.217465210 0.218010484 0.220692365 0.220912366 0.225440187 0.226802527 0.232428228 0.235220828 0.235760696 0.236125970 0.244792194 0.256143937 0.257388526 0.264018338 0.269977058 0.280792898 0.283927584 0.286410782 0.291996303 0.297087313 0.304592893 0.306045597 0.307386029 0.314681115 0.316843259 0.317459722 0.322272500 0.330212393 0.333116930 0.351839212 0.353061841 0.355472643 0.356073966 0.360107655 0.363157968 0.364623287 0.384075013 0.386068211 0.392254939 0.410691283 0.426133939 0.431293094 0.462532857 0.469583430 0.479212854 0.484631888 0.484713075 0.487552000 0.491502908 0.509928575 0.515541030 0.535352997 0.569557809 0.575412851 0.591386457 0.594307486 0.607470465 0.608502780 0.645039522 0.648008378 0.649895205 0.674532318 0.678481212 0.688283002 0.693527376 0.694191311 0.700413136 0.704963816 0.718581037 0.742335356 0.751455826 0.759484149 0.772213144 0.774837537 0.779812842 0.811048142 0.816631747 0.820304893 0.823300850 0.823770424 0.832441248 0.835097461 0.838190694 0.842772013 0.845971341 0.847760057 0.850257064 0.859882635 0.865968038 0.869172973 0.874778774 0.886628578 0.889099665 0.889906844 0.900913883 0.901137462 0.904297967 0.924248504 0.928320922 0.936849832 0.938256577 0.966408622 0.977446432 0.987457174 1.001921192 1.020410944 1.028853693 1.042715997 1.052942073 1.059097809 1.069283555 1.087053318 1.089175717 1.105507606 1.111973302 1.113044419 1.129271228 1.136570648 1.141317848 1.145660619 1.176890976 1.179216576 1.181907155 1.187684387 1.191674832 1.198748485 1.224943298 1.229080944 1.275023732 1.303107364 1.321449510 1.328517896 1.333502492 1.336742952 1.337959518 1.342112284 1.344742688 1.345446706 1.359983677 1.379750677 1.383541550 1.386215899 1.407150309 1.421336044 1.431057349 1.551518474 1.687084716 1.776927983</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">322</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33966617" y3="0.06388402" z3="-0.19073141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38744158" y3="0.16756185" z3="0.41538168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64929698" y3="0.44313116" z3="-0.34414097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73483441" y3="1.24117951" z3="-2.26678122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38977521" y3="0.44868832" z3="-1.1841147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73382519" y3="0.8525434" z3="-3.6648768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64350354" y3="1.7537279" z3="-3.14349125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39650858" y3="2.59828702" z3="-4.6313219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56876044" y3="1.25802482" z3="-4.3809047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51935491" y3="2.93457534" z3="-5.19284349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92285498" y3="-0.47727484" z3="-3.43612726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09732104" y3="0.06692405" z3="-0.99922253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39826447" y3="-1.08123644" z3="-1.99219844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92687561" y3="-0.94851573" z3="-1.81956272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10014292" y3="-2.40519368" z3="-1.83123758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14426182" y3="-3.62224685" z3="0.6761301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00237165" y3="-5.22692179" z3="-4.74940854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23355612" y3="-4.97684355" z3="-3.7103668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83808974" y3="-4.30639046" z3="-1.08753929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78807788" y3="-4.56806892" z3="-2.85486304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.54967241" y3="-5.07665589" z3="-3.25462447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85294169" y3="-4.73601834" z3="-1.93871649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49777791" y3="-4.24748582" z3="-1.52705883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82076005" y3="-4.47932275" z3="-3.19998756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34557547" y3="-5.39129703" z3="-3.9327877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.88962471" y3="-4.78241877" z3="-1.59667615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.030985" y3="-3.86717811" z3="0.23576811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17280465" y3="-3.66112353" z3="0.88044683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05849773" y3="-4.12543209" z3="0.444257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16878248" y3="-3.53259912" z3="2.34809572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22782631" y3="-3.36089945" z3="5.14676526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36325458" y3="-3.74994085" z3="3.05046311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00389437" y3="-3.23490233" z3="3.07101589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03072063" y3="-3.14937487" z3="4.46003285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39187839" y3="-3.66638465" z3="4.43977529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27636658" y3="-3.99459776" z3="2.50107402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04569402" y3="-3.09033228" z3="2.56687787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10326565" y3="-2.93654962" z3="4.99926238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32861647" y3="-3.84729184" z3="4.97420625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24837165" y3="-3.30214942" z3="6.23859253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41413972" y3="-3.88264238" z3="-0.61953562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17351332" y3="-3.37443924" z3="-1.06820122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52421186" y3="0.25521566" z3="-4.71225115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0877607" y3="-1.73511878" z3="0.03088394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91618419" y3="-0.98943045" z3="1.19642372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85788846" y3="-0.33559735" z3="1.53388122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38768658" y3="0.54591116" z3="1.23543314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47720484" y3="1.45547223" z3="-0.38491028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97125231" y3="-0.70425183" z3="1.39906216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37369199" y3="1.72778824" z3="2.68880969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89141072" y3="-0.98916246" z3="2.0938653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66676127" y3="-0.38092165" z3="3.35581938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.23010437" y3="0.773357" z3="-1.21640085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.28722738" y3="2.25485477" z3="-0.37532491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.46287844" y3="1.92792657" z3="-0.54259536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.00688159" y3="-1.0748036" z3="2.43727367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94028123" y3="-0.23484811" z3="1.15903896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84666786" y3="-1.54251679" z3="0.69423036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42007395" y3="1.18075403" z3="3.64715609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55884469" y3="2.321191" z3="2.68543672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22068578" y3="2.43573487" z3="2.65012683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80350945" y3="-0.83651438" z3="3.86680418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58162139" y3="-0.56182712" z3="3.93544009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.50025216" y3="0.70279465" z3="3.24145041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83620606" y3="-0.68544284" z3="0.99541428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41960557" y3="-2.01619881" z3="0.8650651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76645626" y3="-2.6584015" z3="1.90977771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54564043" y3="-1.95636634" z3="3.09071096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01361238" y3="-0.65898659" z3="3.27792607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66735826" y3="-0.03063077" z3="2.22270218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53256856" y3="-2.52092733" z3="-0.09618631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37797667" y3="-3.67092393" z3="1.79271692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68274262" y3="-2.55391295" z3="4.11474524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82243627" y3="-0.14227096" z3="4.21928559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00310243" y3="1.00434111" z3="2.33165858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79010525" y3="0.47971132" z3="-4.28159862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77360777" y3="-0.48509583" z3="-4.45399961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43229573" y3="-1.67792606" z3="-5.0813299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14881097" y3="-1.91301518" z3="-5.56502898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8279367" y3="-0.94523466" z3="-5.36892899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.029543" y3="1.40426483" z3="-3.74944276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79031442" y3="-0.33588965" z3="-4.08957537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44840583" y3="-2.72376584" z3="-5.21876281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07570876" y3="-2.85406021" z3="-6.06655949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84760286" y3="-1.13431485" z3="-5.70863686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.33820819" y3="-1.85272707" z3="5.0463948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32069301" y3="-3.70125052" z3="3.95692022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2317582" y3="-3.62486743" z3="-6.00021294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44748065" y3="-2.63612988" z3="-4.53266775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07831142" y3="1.15444955" z3="-1.4977418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.12002255" y3="1.54573067" z3="-2.4775939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44980594" y3="1.47015152" z3="-1.69943221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86441755" y3="2.12452559" z3="-2.83359359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1742745" y3="1.17037349" z3="-0.9359456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.92306084" y3="2.35643106" z3="-2.98079501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58479081" y3="2.20389703" z3="-3.65039851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91881173" y3="2.48458947" z3="-3.82352799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86495392" y3="2.477006" z3="-4.42551588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25358868" y3="2.98316528" z3="-4.73713896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.42137761" y3="3.15713461" z3="-3.35224201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30882278" y3="3.57004101" z3="-4.14319344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2355561" y3="4.1678417" z3="-2.76710518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.99370334" y3="5.50038399" z3="-3.00250458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.06217182" y3="3.87916691" z3="-2.11597723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.63539786" y3="6.25603641" z3="-2.54007649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.09291103" y3="4.95569414" z3="-4.38039485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.9198621" y3="5.90376416" z3="-3.83113259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.24359229" y3="5.25360018" z3="-5.00303923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.74297722" y3="6.9666117" z3="-4.01804883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48407193" y3="-2.21652582" z3="-0.29126756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4510564" y3="-3.00359315" z3="-1.06359766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01098226" y3="-2.60677601" z3="0.59418766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10233244" y3="-1.39656525" z3="-0.70365301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1850695" y3="-1.42866525" z3="-1.13768589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32635152" y3="-0.38680291" z3="-1.47999186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10812691" y3="-1.55049527" z3="-0.93302248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42258442" y3="-2.07928904" z3="-1.99247533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3397,.0639,-.1907;7.3874,.1676,.4154;6.6493,.4431,-.3441;4.7348,1.2412,-2.2668;4.3898,.4487,-1.1841;2.7338,.8525,-3.6649;3.6435,1.7537,-3.1435;1.3965,2.5983,-4.6313;1.5688,1.258,-4.3809;.5194,2.9346,-5.1928;2.9229,-.4773,-3.4361;3.0973,.0669,-.9992;2.3983,-1.0812,-1.9922;.9269,-.9485,-1.8196;3.1001,-2.4052,-1.8312;-.1443,-3.6222,.6761;-.0024,-5.2269,-4.7494;-.2336,-4.9768,-3.7104;-.8381,-4.3064,-1.0875;.7881,-4.5681,-2.8549;-1.5497,-5.0767,-3.2546;-1.8529,-4.736,-1.9387;.4978,-4.2475,-1.5271;1.8208,-4.4793,-3.2;-2.3456,-5.3913,-3.9328;-2.8896,-4.7824,-1.5967;-1.031,-3.8672,.2358;-2.1728,-3.6611,.8804;-3.0585,-4.1254,.4443;-2.1688,-3.5326,2.3481;-2.2278,-3.3609,5.1468;-3.3633,-3.7499,3.0505;-1.0039,-3.2349,3.071;-1.0307,-3.1494,4.46;-3.3919,-3.6664,4.4398;-4.2764,-3.9946,2.5011;-.0457,-3.0903,2.5669;-.1033,-2.9365,4.9993;-4.3286,-3.8473,4.9742;-2.2484,-3.3021,6.2386;1.4141,-3.8826,-.6195;2.1735,-3.3744,-1.0682;.5242,.2552,-4.7123;-3.0878,-1.7351,.0309;-2.9162,-.9894,1.1964;-1.8579,-.3356,1.5339;-.3877,.5459,1.2354;-.4772,1.4555,-.3849;.9713,-.7043,1.3991;-.3737,1.7278,2.6888;-3.8914,-.9892,2.0939;-3.6668,-.3809,3.3558;-.2301,.7734,-1.2164;.2872,2.2549,-.3753;-1.4629,1.9279,-.5426;1.0069,-1.0748,2.4373;1.9403,-.2348,1.159;.8467,-1.5425,.6942;-.4201,1.1808,3.6472;.5588,2.3212,2.6854;-1.2207,2.4357,2.6501;-2.8035,-.8365,3.8668;-4.5816,-.5618,3.9354;-3.5003,.7028,3.2415;4.8362,-.6854,.9954;4.4196,-2.0162,.8651;3.7665,-2.6584,1.9098;3.5456,-1.9564,3.0907;4.0136,-.659,3.2779;4.6674,-.0306,2.2227;4.5326,-2.5209,-.0962;3.378,-3.6709,1.7927;2.6827,-2.5539,4.1147;3.8224,-.1423,4.2193;5.0031,1.0043,2.3317;-.7901,.4797,-4.2816;-1.7736,-.4851,-4.454;-1.4323,-1.6779,-5.0813;-.1488,-1.913,-5.565;.8279,-.9452,-5.3689;-1.0295,1.4043,-3.7494;-2.7903,-.3359,-4.0896;-2.4484,-2.7238,-5.2188;.0757,-2.8541,-6.0666;1.8476,-1.1343,-5.7086;2.3382,-1.8527,5.0464;2.3207,-3.7013,3.9569;-2.2318,-3.6249,-6.0002;-3.4475,-2.6361,-4.5327;7.0783,1.1544,-1.4977;6.12,1.5457,-2.4776;8.4498,1.4702,-1.6994;8.8644,2.1245,-2.8336;9.1743,1.1704,-.9359;9.9231,2.3564,-2.9808;6.5848,2.2039,-3.6504;7.9188,2.4846,-3.8235;5.865,2.477,-4.4255;8.2536,2.9832,-4.7371;3.4214,3.1571,-3.3522;2.3088,3.57,-4.1432;4.2356,4.1678,-2.7671;3.9937,5.5004,-3.0025;5.0622,3.8792,-2.116;4.6354,6.256,-2.5401;2.0929,4.9557,-4.3804;2.9199,5.9038,-3.8311;1.2436,5.2536,-5.003;2.743,6.9666,-4.018;-4.4841,-2.2165,-.2913;-4.4511,-3.0036,-1.0636;-5.011,-2.6068,.5942;-5.1023,-1.3966,-.7037;-2.1851,-1.4287,-1.1377;-2.3264,-.3868,-1.48;-1.1081,-1.5505,-.933;-2.4226,-2.0793,-1.9925;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420368906</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000959103303 0.000155065402 0.016968989687 0.005337392087</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030786674 0.000071934 0.000086307 0.000099537 0.000186424 0.000250782 0.000351503 0.000438450 0.000585974 0.000814388 0.000895840 0.000928090 0.001058829 0.001201462 0.001446860 0.001499886 0.001568220 0.001719784 0.001754197 0.001930710 0.001952996 0.002222326 0.002361333 0.002535487 0.002679969 0.003003544 0.003044563 0.003090160 0.003634252 0.003889462 0.004403858 0.004671166 0.004787477 0.005096731 0.006004666 0.006084758 0.006300490 0.006678858 0.006884934 0.007557453 0.007968412 0.008231317 0.008417183 0.009431208 0.009496694 0.010029354 0.010108022 0.011179176 0.011909271 0.012227160 0.013007050 0.013158605 0.014372864 0.014878148 0.015411504 0.015824914 0.015992150 0.016553704 0.016792490 0.017488883 0.018244777 0.018853532 0.019130284 0.019651878 0.020191693 0.020650794 0.021239204 0.021396283 0.021853140 0.023068345 0.023534938 0.026594689 0.026906205 0.028137273 0.028369588 0.029628832 0.030536767 0.031648956 0.033243694 0.033746740 0.034166257 0.035762167 0.037125212 0.037322949 0.039005412 0.039701370 0.040190328 0.041136952 0.042595451 0.044725718 0.045788110 0.047188624 0.048059918 0.049287226 0.050526845 0.051089347 0.051314155 0.051831667 0.052499976 0.052822218 0.052968332 0.053270444 0.054874413 0.054994182 0.056253262 0.056426888 0.056614993 0.057073158 0.057246544 0.059241940 0.060657144 0.061084105 0.061910217 0.062416696 0.063445720 0.064542021 0.065334310 0.066178932 0.066623090 0.068568989 0.069308595 0.070294197 0.072829553 0.074523554 0.074806431 0.076537419 0.079310211 0.084570571 0.086996833 0.087302324 0.087761007 0.089805152 0.090719389 0.091657687 0.094320759 0.095175526 0.095941093 0.096507449 0.097877085 0.098856249 0.100245424 0.100856383 0.102451898 0.103231881 0.103687542 0.104440811 0.104614765 0.105363934 0.106379281 0.107115447 0.108263165 0.110161372 0.111221731 0.112548556 0.113565147 0.115156913 0.116298389 0.116878005 0.118781664 0.121393164 0.122556902 0.123871840 0.125530972 0.126298144 0.126433890 0.126817695 0.127891361 0.132203750 0.135149150 0.135952967 0.143194964 0.144124916 0.147134576 0.147623998 0.149838737 0.151625959 0.154695606 0.154942379 0.156755542 0.161329501 0.162031964 0.173832112 0.174482954 0.182245092 0.185597854 0.186580476 0.189710970 0.190456942 0.194511778 0.195851906 0.199013616 0.200440727 0.205262338 0.207208011 0.207567546 0.210303384 0.216869654 0.217467059 0.218010802 0.220738983 0.220916585 0.225440170 0.226803601 0.232428553 0.235222485 0.235761647 0.236126196 0.244793760 0.256145927 0.257389126 0.264019434 0.269977458 0.280792909 0.283928688 0.286411123 0.291996311 0.297088625 0.304593006 0.306047278 0.307386393 0.314686282 0.316844623 0.317459745 0.322272545 0.330214864 0.333130597 0.351840151 0.353062243 0.355478049 0.356075868 0.360107684 0.363163116 0.364623340 0.384077294 0.386072115 0.392260176 0.410695107 0.426134681 0.431293085 0.462533456 0.469588676 0.479214298 0.484632302 0.484714006 0.487554067 0.491502936 0.509931654 0.515541152 0.535353099 0.569560121 0.575415957 0.591389065 0.594307691 0.607476374 0.608507074 0.645041891 0.648011186 0.649895329 0.674532702 0.678484791 0.688284172 0.693527700 0.694194213 0.700413019 0.704983577 0.718582151 0.742337974 0.751456118 0.759484776 0.772213461 0.774839480 0.779817830 0.811056843 0.816658717 0.820339640 0.823309883 0.823774408 0.832447972 0.835099858 0.838195659 0.842773799 0.845971483 0.847760443 0.850257226 0.859882717 0.865971010 0.869173245 0.874789078 0.886634709 0.889128367 0.889909761 0.900913759 0.901140685 0.904303548 0.924248557 0.928320839 0.936866556 0.938258325 0.966408890 0.977447971 0.987457541 1.001927609 1.020411902 1.028854150 1.042731607 1.052945843 1.059108818 1.069289317 1.087054256 1.089177962 1.105525767 1.111974079 1.113051273 1.129349583 1.136571033 1.141325974 1.145667685 1.176893399 1.179217250 1.181908495 1.187691325 1.191675865 1.198757848 1.224972258 1.229081180 1.275038925 1.303107510 1.321452948 1.328518746 1.333503943 1.336747318 1.337960227 1.342112518 1.344745249 1.345448077 1.359986617 1.379758231 1.383543034 1.386217965 1.407151470 1.421342306 1.431068892 1.551518531 1.687106832 1.776962665</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">323</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3382461" y3="0.06060601" z3="-0.19115744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38497858" y3="0.16822164" z3="0.41748545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64715167" y3="0.44366855" z3="-0.34227889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73293943" y3="1.24002368" z3="-2.26580636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38856251" y3="0.44517251" z3="-1.18486792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73347903" y3="0.85070611" z3="-3.66602975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.64127781" y3="1.75224436" z3="-3.14228353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39430037" y3="2.59607457" z3="-4.6305399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56847773" y3="1.25573895" z3="-4.38232038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51715327" y3="2.93196659" z3="-5.19234079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92398598" y3="-0.47918777" z3="-3.4391134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09666739" y3="0.06148184" z3="-1.00157057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39845972" y3="-1.08530163" z3="-1.99659629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92699783" y3="-0.95309207" z3="-1.82435225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10023352" y3="-2.40947614" z3="-1.83700687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14364889" y3="-3.61724955" z3="0.67582149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00466268" y3="-5.23489023" z3="-4.74608356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23528023" y3="-4.98242128" z3="-3.70757271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83879792" y3="-4.30482792" z3="-1.08625727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78683195" y3="-4.57313092" z3="-2.85311651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55146707" y3="-5.0790994" z3="-3.25142246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85413237" y3="-4.73497276" z3="-1.93635308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49708794" y3="-4.24909271" z3="-1.52610368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8196593" y3="-4.48692777" z3="-3.19855756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.34826387" y3="-5.39361855" z3="-3.92885484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89081608" y3="-4.77895897" z3="-1.59427464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03107583" y3="-3.86242656" z3="0.23611587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17245764" y3="-3.65681934" z3="0.88138471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05795225" y3="-4.12180756" z3="0.44564779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16810926" y3="-3.52736605" z3="2.34892255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22704859" y3="-3.3535789" z3="5.14745857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3629136" y3="-3.74190298" z3="3.0514342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00247183" y3="-3.23216252" z3="3.07176732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02928848" y3="-3.14564989" z3="4.46067779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39136004" y3="-3.65738945" z3="4.44066654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27679587" y3="-3.98471992" z3="2.50216313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04372269" y3="-3.09085482" z3="2.56778399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10119648" y3="-2.93527981" z3="4.99988631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32831388" y3="-3.83614413" z3="4.97510518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24748866" y3="-3.29411406" z3="6.23922533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4141559" y3="-3.88334058" z3="-0.61973658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17297791" y3="-3.37670416" z3="-1.07007786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52540629" y3="0.25164695" z3="-4.71574866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08860395" y3="-1.73131471" z3="0.03078806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91405921" y3="-0.98411396" z3="1.19487144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85426803" y3="-0.3309579" z3="1.52912957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.38317664" y3="0.54856501" z3="1.22938771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.47034376" y3="1.4539194" z3="-0.39332973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97420897" y3="-0.70297767" z3="1.39768371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36928636" y3="1.73503872" z3="2.67897879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88761832" y3="-0.98127307" z3="2.09423096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65925562" y3="-0.37177673" z3="3.35505792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22819762" y3="0.76840224" z3="-1.22348232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.29865495" y3="2.24889539" z3="-0.38711313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.45358269" y3="1.93167836" z3="-0.55047715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0089771" y3="-1.06915985" z3="2.43678021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94464758" y3="-0.23630577" z3="1.15597695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85003975" y3="-1.54394128" z3="0.69656916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4185664" y3="1.19129181" z3="3.63907738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56427784" y3="2.32662582" z3="2.67527148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21472338" y3="2.44453627" z3="2.63620557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79495171" y3="-0.82733085" z3="3.8643709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57278384" y3="-0.55112793" z3="3.93758051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49234228" y3="0.71155632" z3="3.23898259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83541554" y3="-0.69162836" z3="0.99324518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41489256" y3="-2.02080912" z3="0.85874683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76237227" y3="-2.66516914" z3="1.90247259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54712515" y3="-1.96729893" z3="3.08736142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01882935" y3="-0.67199787" z3="3.27814965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67132221" y3="-0.0411905" z3="2.22355194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52548043" y3="-2.52252302" z3="-0.10377601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37086088" y3="-3.67606516" z3="1.78221201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68582427" y3="-2.56666185" z3="4.11172842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83088499" y3="-0.15838697" z3="4.22147319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00959752" y3="0.99257853" z3="2.33558148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78925606" y3="0.47488668" z3="-4.28498939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77167394" y3="-0.49109706" z3="-4.45855566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42912391" y3="-1.68375732" z3="-5.08488181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14513389" y3="-1.91756196" z3="-5.56741116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83038302" y3="-0.94853107" z3="-5.37213738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02954593" y3="1.39906092" z3="-3.75323691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78836694" y3="-0.34290625" z3="-4.09345144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44429556" y3="-2.73025288" z3="-5.22131484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08124545" y3="-2.858692" z3="-6.06924738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8504311" y3="-1.13649271" z3="-5.71148848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34883143" y3="-1.86969606" z3="5.04886127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31687148" y3="-3.71111427" z3="3.94812632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2245912" y3="-3.63509194" z3="-5.99806645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4458865" y3="-2.63932176" z3="-4.5391089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07577788" y3="1.15811246" z3="-1.49407463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11755314" y3="1.54808937" z3="-2.47458408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44672062" y3="1.47802113" z3="-1.69335644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.86095361" y3="2.13484745" z3="-2.82592232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17118065" y3="1.17931835" z3="-0.92933597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91904789" y3="2.36939022" z3="-2.97137112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58206624" y3="2.20943295" z3="-3.64554432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91560453" y3="2.49406799" z3="-3.81641904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86267568" y3="2.48267027" z3="-4.42095711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.25025738" y3="2.99665849" z3="-4.72847647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4165333" y3="3.15584689" z3="-3.3477733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30414873" y3="3.56850541" z3="-4.13906921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22780417" y3="4.1667253" z3="-2.75885406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.98353736" y3="5.49933544" z3="-2.99103021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.05420076" y3="3.87793194" z3="-2.10751678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.62315854" y3="6.25488183" z3="-2.52594548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08586925" y3="4.95418017" z3="-4.37314993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90991401" y3="5.90268577" z3="-3.81996637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23674696" y3="5.25200931" z3="-4.99608648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73096281" y3="6.96566931" z3="-4.00419949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48572238" y3="-2.21264621" z3="-0.28756031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45505009" y3="-3.0018738" z3="-1.05802426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01115815" y3="-2.60035099" z3="0.60006937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10417344" y3="-1.39324358" z3="-0.7005735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18772015" y3="-1.42721833" z3="-1.13988096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32731303" y3="-0.38518782" z3="-1.48183472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11065061" y3="-1.55148779" z3="-0.93782841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4295685" y3="-2.0772579" z3="-1.99428124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3382,.0606,-.1912;7.385,.1682,.4175;6.6472,.4437,-.3423;4.7329,1.24,-2.2658;4.3886,.4452,-1.1849;2.7335,.8507,-3.666;3.6413,1.7522,-3.1423;1.3943,2.5961,-4.6305;1.5685,1.2557,-4.3823;.5172,2.932,-5.1923;2.924,-.4792,-3.4391;3.0967,.0615,-1.0016;2.3985,-1.0853,-1.9966;.927,-.9531,-1.8244;3.1002,-2.4095,-1.837;-.1436,-3.6172,.6758;-.0047,-5.2349,-4.7461;-.2353,-4.9824,-3.7076;-.8388,-4.3048,-1.0863;.7868,-4.5731,-2.8531;-1.5515,-5.0791,-3.2514;-1.8541,-4.735,-1.9364;.4971,-4.2491,-1.5261;1.8197,-4.4869,-3.1986;-2.3483,-5.3936,-3.9289;-2.8908,-4.779,-1.5943;-1.0311,-3.8624,.2361;-2.1725,-3.6568,.8814;-3.058,-4.1218,.4456;-2.1681,-3.5274,2.3489;-2.227,-3.3536,5.1475;-3.3629,-3.7419,3.0514;-1.0025,-3.2322,3.0718;-1.0293,-3.1456,4.4607;-3.3914,-3.6574,4.4407;-4.2768,-3.9847,2.5022;-.0437,-3.0909,2.5678;-.1012,-2.9353,4.9999;-4.3283,-3.8361,4.9751;-2.2475,-3.2941,6.2392;1.4142,-3.8833,-.6197;2.173,-3.3767,-1.0701;.5254,.2516,-4.7157;-3.0886,-1.7313,.0308;-2.9141,-.9841,1.1949;-1.8543,-.331,1.5291;-.3832,.5486,1.2294;-.4703,1.4539,-.3933;.9742,-.703,1.3977;-.3693,1.735,2.679;-3.8876,-.9813,2.0942;-3.6593,-.3718,3.3551;-.2282,.7684,-1.2235;.2987,2.2489,-.3871;-1.4536,1.9317,-.5505;1.009,-1.0692,2.4368;1.9446,-.2363,1.156;.85,-1.5439,.6966;-.4186,1.1913,3.6391;.5643,2.3266,2.6753;-1.2147,2.4445,2.6362;-2.795,-.8273,3.8644;-4.5728,-.5511,3.9376;-3.4923,.7116,3.239;4.8354,-.6916,.9932;4.4149,-2.0208,.8587;3.7624,-2.6652,1.9025;3.5471,-1.9673,3.0874;4.0188,-.672,3.2781;4.6713,-.0412,2.2236;4.5255,-2.5225,-.1038;3.3709,-3.6761,1.7822;2.6858,-2.5667,4.1117;3.8309,-.1584,4.2215;5.0096,.9926,2.3356;-.7893,.4749,-4.285;-1.7717,-.4911,-4.4586;-1.4291,-1.6838,-5.0849;-.1451,-1.9176,-5.5674;.8304,-.9485,-5.3721;-1.0295,1.3991,-3.7532;-2.7884,-.3429,-4.0935;-2.4443,-2.7303,-5.2213;.0812,-2.8587,-6.0692;1.8504,-1.1365,-5.7115;2.3488,-1.8697,5.0489;2.3169,-3.7111,3.9481;-2.2246,-3.6351,-5.9981;-3.4459,-2.6393,-4.5391;7.0758,1.1581,-1.4941;6.1176,1.5481,-2.4746;8.4467,1.478,-1.6934;8.861,2.1348,-2.8259;9.1712,1.1793,-.9293;9.919,2.3694,-2.9714;6.5821,2.2094,-3.6455;7.9156,2.4941,-3.8164;5.8627,2.4827,-4.421;8.2503,2.9967,-4.7285;3.4165,3.1558,-3.3478;2.3041,3.5685,-4.1391;4.2278,4.1667,-2.7589;3.9835,5.4993,-2.991;5.0542,3.8779,-2.1075;4.6232,6.2549,-2.5259;2.0859,4.9542,-4.3731;2.9099,5.9027,-3.82;1.2367,5.252,-4.9961;2.731,6.9657,-4.0042;-4.4857,-2.2126,-.2876;-4.4551,-3.0019,-1.058;-5.0112,-2.6004,.6001;-5.1042,-1.3932,-.7006;-2.1877,-1.4272,-1.1399;-2.3273,-.3852,-1.4818;-1.1107,-1.5515,-.9378;-2.4296,-2.0773,-1.9943;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424456651</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000650038249 0.000107442093 0.021040907445 0.005331809231</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030786638 -0.000121331 0.000096600 0.000166243 0.000241510 0.000280619 0.000348196 0.000438471 0.000591126 0.000814428 0.000896533 0.000928186 0.001060682 0.001201408 0.001446807 0.001499705 0.001568266 0.001719719 0.001753432 0.001930837 0.001953053 0.002222952 0.002361309 0.002536558 0.002681886 0.003002451 0.003045868 0.003089830 0.003641004 0.003894367 0.004408491 0.004671136 0.004787234 0.005097044 0.006004943 0.006085273 0.006300793 0.006680657 0.006886010 0.007557458 0.007969458 0.008231739 0.008416928 0.009431542 0.009496604 0.010029750 0.010108098 0.011182800 0.011909357 0.012227116 0.013007312 0.013158620 0.014373251 0.014878225 0.015411143 0.015824867 0.015991923 0.016553574 0.016793309 0.017489057 0.018245198 0.018854484 0.019129862 0.019652669 0.020191399 0.020650754 0.021239239 0.021396415 0.021853115 0.023068388 0.023535325 0.026598503 0.026906128 0.028137838 0.028370772 0.029629927 0.030537544 0.031649871 0.033246097 0.033747017 0.034166435 0.035762203 0.037125121 0.037323201 0.039008536 0.039701865 0.040190949 0.041137354 0.042595421 0.044725481 0.045789299 0.047190664 0.048062177 0.049287211 0.050530429 0.051089368 0.051314189 0.051831684 0.052500690 0.052822237 0.052968303 0.053270537 0.054876415 0.054994667 0.056253866 0.056426877 0.056615227 0.057073411 0.057246503 0.059242111 0.060657055 0.061084116 0.061910419 0.062416803 0.063446563 0.064542005 0.065334267 0.066178948 0.066623015 0.068570098 0.069308476 0.070294155 0.072832127 0.074523343 0.074806489 0.076537300 0.079312124 0.084570724 0.086997674 0.087303534 0.087760932 0.089806864 0.090719271 0.091662587 0.094322089 0.095183632 0.095941174 0.096507851 0.097877338 0.098856036 0.100245521 0.100856779 0.102452089 0.103232189 0.103688015 0.104440373 0.104614462 0.105363819 0.106380067 0.107115447 0.108263186 0.110162043 0.111221729 0.112550731 0.113567121 0.115157884 0.116298407 0.116878684 0.118781715 0.121393159 0.122556849 0.123871906 0.125531688 0.126300249 0.126434315 0.126818285 0.127891408 0.132204354 0.135150698 0.135952852 0.143194494 0.144124979 0.147140529 0.147624292 0.149838100 0.151625314 0.154695539 0.154942826 0.156754233 0.161329423 0.162032309 0.173833191 0.174483087 0.182244778 0.185598646 0.186580744 0.189711026 0.190457491 0.194512422 0.195853142 0.199015984 0.200441033 0.205264144 0.207208198 0.207567384 0.210303380 0.216869655 0.217466780 0.218010792 0.220752482 0.220919947 0.225440161 0.226803782 0.232428660 0.235223489 0.235762495 0.236126670 0.244794104 0.256146420 0.257389590 0.264019388 0.269977742 0.280792938 0.283928687 0.286411112 0.291996339 0.297088832 0.304593211 0.306047909 0.307387221 0.314689042 0.316845525 0.317459748 0.322272533 0.330216273 0.333136553 0.351840870 0.353062278 0.355479550 0.356077508 0.360107696 0.363166733 0.364623523 0.384077719 0.386073974 0.392263821 0.410697354 0.426135687 0.431293845 0.462533842 0.469589941 0.479214877 0.484632196 0.484714003 0.487554300 0.491502936 0.509932132 0.515541565 0.535353110 0.569560412 0.575419636 0.591389476 0.594307679 0.607476190 0.608509497 0.645043332 0.648011505 0.649896252 0.674533449 0.678486379 0.688284148 0.693528130 0.694197379 0.700413065 0.704993771 0.718582149 0.742338733 0.751456734 0.759485092 0.772213559 0.774841432 0.779818328 0.811059456 0.816667048 0.820357716 0.823312132 0.823778324 0.832450069 0.835100207 0.838195692 0.842775075 0.845971497 0.847761278 0.850257227 0.859882716 0.865972311 0.869174101 0.874795030 0.886634971 0.889129004 0.889910682 0.900914225 0.901142044 0.904308417 0.924249409 0.928320879 0.936871274 0.938263233 0.966409772 0.977454786 0.987457579 1.001928966 1.020413144 1.028854794 1.042736466 1.052945807 1.059108803 1.069294183 1.087054336 1.089177937 1.105532998 1.111975476 1.113051437 1.129360552 1.136571483 1.141328604 1.145667640 1.176893372 1.179217303 1.181909635 1.187691725 1.191676214 1.198761695 1.224985208 1.229082262 1.275040961 1.303107569 1.321454873 1.328518607 1.333503876 1.336747116 1.337963709 1.342123716 1.344745321 1.345447906 1.359987126 1.379759935 1.383544427 1.386217915 1.407175563 1.421342752 1.431083995 1.551518806 1.687115940 1.776963210</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">324</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33979898" y3="0.05790651" z3="-0.19305225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38612502" y3="0.16983247" z3="0.41661515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64780199" y3="0.44471318" z3="-0.34296708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73229023" y3="1.24052468" z3="-2.2654952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3892997" y3="0.44254752" z3="-1.18608249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73344899" y3="0.85026806" z3="-3.66667526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63993232" y3="1.75248931" z3="-3.1413397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39202601" y3="2.59508443" z3="-4.6291244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56787654" y3="1.2545421" z3="-4.38266068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5145021" y3="2.93049268" z3="-5.19062252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92572628" y3="-0.47977881" z3="-3.44144654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09799296" y3="0.05648354" z3="-1.00281458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39882441" y3="-1.08790904" z3="-2.00009511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92746179" y3="-0.95377149" z3="-1.82828023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09841152" y3="-2.41342905" z3="-1.84232518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14586218" y3="-3.62078364" z3="0.67908385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01358547" y3="-5.23948171" z3="-4.74334589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24266494" y3="-4.98710408" z3="-3.70445604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84215265" y3="-4.30979085" z3="-1.08217959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78035741" y3="-4.5755527" z3="-2.85215075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55768628" y3="-5.08640444" z3="-3.24569061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85832663" y3="-4.74249493" z3="-1.93008372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49265867" y3="-4.25150073" z3="-1.52468203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81236658" y3="-4.48732391" z3="-3.19966338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3551067" y3="-5.40258174" z3="-3.92156627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89432298" y3="-4.78848499" z3="-1.58565262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03318791" y3="-3.86646027" z3="0.24006978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17437648" y3="-3.65572526" z3="0.88441554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06116999" y3="-4.11952667" z3="0.44998262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16984919" y3="-3.52228483" z3="2.35163699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22809581" y3="-3.33966122" z3="5.14967398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36555926" y3="-3.73061369" z3="3.0547692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00337769" y3="-3.22851845" z3="3.07354857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02972811" y3="-3.13777085" z3="4.46222799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39385011" y3="-3.64142887" z3="4.44372266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27988183" y3="-3.97258304" z3="2.50631458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04421775" y3="-3.09197365" z3="2.56910839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10085392" y3="-2.92895078" z3="5.00065284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33156601" y3="-3.81510322" z3="4.9787637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24841942" y3="-3.2765891" z3="6.24125712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4111393" y3="-3.88362835" z3="-0.62036627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17039411" y3="-3.3790859" z3="-1.07286622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52576572" y3="0.25003348" z3="-4.71653952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08396803" y3="-1.73054373" z3="0.02802263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91207036" y3="-0.98148" z3="1.19135551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85231182" y3="-0.32993566" z3="1.52822661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37916379" y3="0.54702243" z3="1.2309422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46402396" y3="1.45505935" z3="-0.39038744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97666704" y3="-0.70624861" z3="1.39717543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36408494" y3="1.73023094" z3="2.68320712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88866286" y3="-0.97504035" z3="2.08730166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66436967" y3="-0.36186191" z3="3.34688492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22119917" y3="0.77053874" z3="-1.2211695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30519018" y3="2.24984872" z3="-0.38218815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44697209" y3="1.93317835" z3="-0.5482165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01091793" y3="-1.07656523" z3="2.43560468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94674711" y3="-0.23880058" z3="1.15763318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85106911" y3="-1.54485294" z3="0.6927765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41514273" y3="1.18429911" z3="3.64187237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57081217" y3="2.31988569" z3="2.68178037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20815867" y3="2.4414573" z3="2.64162954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80318109" y3="-0.81739915" z3="3.86125462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58061677" y3="-0.53770977" z3="3.9258622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49477428" y3="0.72089322" z3="3.22797327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8385984" y3="-0.69747517" z3="0.9901172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41641473" y3="-2.02579618" z3="0.85263915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76374393" y3="-2.67207073" z3="1.8950831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54986179" y3="-1.97695703" z3="3.08135667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02457143" y3="-0.68308734" z3="3.27576592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67718901" y3="-0.05032324" z3="2.22249048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5237653" y3="-2.52472947" z3="-0.11243749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37019494" y3="-3.68192201" z3="1.77227412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68752827" y3="-2.57712476" z3="4.10433922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83923438" y3="-0.17210889" z3="4.22142217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01761062" y3="0.98255346" z3="2.33733629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78916756" y3="0.47121775" z3="-4.28613416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77035079" y3="-0.49583013" z3="-4.45928011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42612949" y3="-1.68781285" z3="-5.08641992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14211591" y3="-1.91945502" z3="-5.57033633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83221354" y3="-0.9491666" z3="-5.37429848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03078005" y3="1.39469786" z3="-3.75323949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7873688" y3="-0.34922773" z3="-4.09480139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43977123" y3="-2.7363027" z3="-5.222785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08493404" y3="-2.85979577" z3="-6.0722302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85226422" y3="-1.13553401" z3="-5.71422185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35453307" y3="-1.88234621" z3="5.04494912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.314375" y3="-3.71962162" z3="3.93707336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21930651" y3="-3.64033792" z3="-5.9999344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44089475" y3="-2.64768547" z3="-4.53990438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07501353" y3="1.16256571" z3="-1.49312091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11635544" y3="1.55206991" z3="-2.47333588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44499388" y3="1.48688268" z3="-1.69082801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85808793" y3="2.1481428" z3="-2.82159618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16961824" y3="1.1887471" z3="-0.9268342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9155806" y3="2.38724544" z3="-2.96553345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57972497" y3="2.21669669" z3="-3.64300154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91248192" y3="2.50608056" z3="-3.81228721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8599382" y3="2.48851495" z3="-4.41861073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24623032" y3="3.0101755" z3="-4.72338835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41341308" y3="3.15596138" z3="-3.34534419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.3006614" y3="3.56799912" z3="-4.13648794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22305188" y3="4.16731815" z3="-2.75501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97676848" y3="5.49994309" z3="-2.98552323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04955066" y3="3.87914532" z3="-2.10352459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61501369" y3="6.25596897" z3="-2.51909065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08037904" y3="4.95367901" z3="-4.36892612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90299043" y3="5.90263103" z3="-3.81453685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23099419" y3="5.25091927" z3="-4.99180287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72252101" y3="6.9655859" z3="-3.9975291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48094579" y3="-2.20931192" z3="-0.29486408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44852273" y3="-2.9994172" z3="-1.06403891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01075144" y3="-2.59479037" z3="0.59095018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09587143" y3="-1.38909564" z3="-0.71152387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17881917" y3="-1.42965552" z3="-1.14007037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31595798" y3="-0.38806379" z3="-1.48469785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10266156" y3="-1.55430597" z3="-0.93380066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41738574" y3="-2.08132148" z3="-1.99366533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0579,-.1931;7.3861,.1698,.4166;6.6478,.4447,-.343;4.7323,1.2405,-2.2655;4.3893,.4425,-1.1861;2.7334,.8503,-3.6667;3.6399,1.7525,-3.1413;1.392,2.5951,-4.6291;1.5679,1.2545,-4.3827;.5145,2.9305,-5.1906;2.9257,-.4798,-3.4414;3.098,.0565,-1.0028;2.3988,-1.0879,-2.0001;.9275,-.9538,-1.8283;3.0984,-2.4134,-1.8423;-.1459,-3.6208,.6791;-.0136,-5.2395,-4.7433;-.2427,-4.9871,-3.7045;-.8422,-4.3098,-1.0822;.7804,-4.5756,-2.8522;-1.5577,-5.0864,-3.2457;-1.8583,-4.7425,-1.9301;.4927,-4.2515,-1.5247;1.8124,-4.4873,-3.1997;-2.3551,-5.4026,-3.9216;-2.8943,-4.7885,-1.5857;-1.0332,-3.8665,.2401;-2.1744,-3.6557,.8844;-3.0612,-4.1195,.45;-2.1698,-3.5223,2.3516;-2.2281,-3.3397,5.1497;-3.3656,-3.7306,3.0548;-1.0034,-3.2285,3.0735;-1.0297,-3.1378,4.4622;-3.3939,-3.6414,4.4437;-4.2799,-3.9726,2.5063;-.0442,-3.092,2.5691;-.1009,-2.929,5.0007;-4.3316,-3.8151,4.9788;-2.2484,-3.2766,6.2413;1.4111,-3.8836,-.6204;2.1704,-3.3791,-1.0729;.5258,.25,-4.7165;-3.084,-1.7305,.028;-2.9121,-.9815,1.1914;-1.8523,-.3299,1.5282;-.3792,.547,1.2309;-.464,1.4551,-.3904;.9767,-.7062,1.3972;-.3641,1.7302,2.6832;-3.8887,-.975,2.0873;-3.6644,-.3619,3.3469;-.2212,.7705,-1.2212;.3052,2.2498,-.3822;-1.447,1.9332,-.5482;1.0109,-1.0766,2.4356;1.9467,-.2388,1.1576;.8511,-1.5449,.6928;-.4151,1.1843,3.6419;.5708,2.3199,2.6818;-1.2082,2.4415,2.6416;-2.8032,-.8174,3.8613;-4.5806,-.5377,3.9259;-3.4948,.7209,3.228;4.8386,-.6975,.9901;4.4164,-2.0258,.8526;3.7637,-2.6721,1.8951;3.5499,-1.977,3.0814;4.0246,-.6831,3.2758;4.6772,-.0503,2.2225;4.5238,-2.5247,-.1124;3.3702,-3.6819,1.7723;2.6875,-2.5771,4.1043;3.8392,-.1721,4.2214;5.0176,.9826,2.3373;-.7892,.4712,-4.2861;-1.7704,-.4958,-4.4593;-1.4261,-1.6878,-5.0864;-.1421,-1.9195,-5.5703;.8322,-.9492,-5.3743;-1.0308,1.3947,-3.7532;-2.7874,-.3492,-4.0948;-2.4398,-2.7363,-5.2228;.0849,-2.8598,-6.0722;1.8523,-1.1355,-5.7142;2.3545,-1.8823,5.0449;2.3144,-3.7196,3.9371;-2.2193,-3.6403,-5.9999;-3.4409,-2.6477,-4.5399;7.075,1.1626,-1.4931;6.1164,1.5521,-2.4733;8.445,1.4869,-1.6908;8.8581,2.1481,-2.8216;9.1696,1.1887,-.9268;9.9156,2.3872,-2.9655;6.5797,2.2167,-3.643;7.9125,2.5061,-3.8123;5.8599,2.4885,-4.4186;8.2462,3.0102,-4.7234;3.4134,3.156,-3.3453;2.3007,3.568,-4.1365;4.2231,4.1673,-2.755;3.9768,5.4999,-2.9855;5.0496,3.8791,-2.1035;4.615,6.256,-2.5191;2.0804,4.9537,-4.3689;2.903,5.9026,-3.8145;1.231,5.2509,-4.9918;2.7225,6.9656,-3.9975;-4.4809,-2.2093,-.2949;-4.4485,-2.9994,-1.064;-5.0108,-2.5948,.591;-5.0959,-1.3891,-.7115;-2.1788,-1.4297,-1.1401;-2.316,-.3881,-1.4847;-1.1027,-1.5543,-.9338;-2.4174,-2.0813,-1.9937;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650426072465</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000694936714 0.000139821837 0.029966296801 0.005363975525</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030788294 -0.000202010 0.000070540 0.000096870 0.000210258 0.000322928 0.000393490 0.000449368 0.000583840 0.000814572 0.000885003 0.000915139 0.001047856 0.001198924 0.001442609 0.001496513 0.001568920 0.001709611 0.001740385 0.001923390 0.001934011 0.002218013 0.002334096 0.002528914 0.002679316 0.002986364 0.003028949 0.003085359 0.003656117 0.003908467 0.004418166 0.004669945 0.004785806 0.005099099 0.006002344 0.006086229 0.006299801 0.006678862 0.006880622 0.007540028 0.007965128 0.008235515 0.008413532 0.009427045 0.009482711 0.010027133 0.010104233 0.011193922 0.011907371 0.012226947 0.013003759 0.013154469 0.014364568 0.014877533 0.015381383 0.015826923 0.015984612 0.016514377 0.016783575 0.017438283 0.018237968 0.018849198 0.018989590 0.019655649 0.020166245 0.020611722 0.021228356 0.021394403 0.021718270 0.023047590 0.023501069 0.026605398 0.026907106 0.028138779 0.028374157 0.029631396 0.030540703 0.031650149 0.033250612 0.033748749 0.034166860 0.035749645 0.037011143 0.037272650 0.038822979 0.039668287 0.040183748 0.041140195 0.042596006 0.044723210 0.045798045 0.047201118 0.048071270 0.049287158 0.050541265 0.051088880 0.051314057 0.051832176 0.052501941 0.052824747 0.052967874 0.053271085 0.054885065 0.054996012 0.056259666 0.056431919 0.056615539 0.057074346 0.057247513 0.059242778 0.060657937 0.061084819 0.061913702 0.062416775 0.063447195 0.064542245 0.065332425 0.066175429 0.066622043 0.068573407 0.069308315 0.070293538 0.072838226 0.074502634 0.074804962 0.076536307 0.079321059 0.084573190 0.086998086 0.087301419 0.087760338 0.089815574 0.090715957 0.091672914 0.094319937 0.095205130 0.095941328 0.096509498 0.097878175 0.098854242 0.100245738 0.100858124 0.102455204 0.103232679 0.103691330 0.104452853 0.104621347 0.105380126 0.106382448 0.107118807 0.108265199 0.110160505 0.111220207 0.112552726 0.113568365 0.115154141 0.116298447 0.116880044 0.118781576 0.121393185 0.122556731 0.123872635 0.125540520 0.126306491 0.126437851 0.126818885 0.127896073 0.132206722 0.135151650 0.135953151 0.143196031 0.144127483 0.147157813 0.147612672 0.149826869 0.151406410 0.154695027 0.154855588 0.156753185 0.161322744 0.162031923 0.173835030 0.174485501 0.182251892 0.185607540 0.186583198 0.189712683 0.190458443 0.194518388 0.195863182 0.199020777 0.200441557 0.205266557 0.207208789 0.207568066 0.210303878 0.216869595 0.217473198 0.218009429 0.220777780 0.220924281 0.225441958 0.226804446 0.232429323 0.235227221 0.235764663 0.236127751 0.244794913 0.256145655 0.257391810 0.264018936 0.269972330 0.280792716 0.283933095 0.286411761 0.291992997 0.297088649 0.304595251 0.306048535 0.307387275 0.314689970 0.316845295 0.317460375 0.322272150 0.330207581 0.333145307 0.351840132 0.353062133 0.355493364 0.356078057 0.360106660 0.363170030 0.364624583 0.384037768 0.386071570 0.392271331 0.410689009 0.426138891 0.431294457 0.462535010 0.469588127 0.479218933 0.484630714 0.484712307 0.487523039 0.491502047 0.509931786 0.515516108 0.535321800 0.569553828 0.575418558 0.591296291 0.594307751 0.607476313 0.608507050 0.645044810 0.648010716 0.649895426 0.674534994 0.678470787 0.688293755 0.693528601 0.694206164 0.700413317 0.705007949 0.718572190 0.742336749 0.751457679 0.759483965 0.772215218 0.774841543 0.779819563 0.811068199 0.816681240 0.820383243 0.823312509 0.823782543 0.832452478 0.835101680 0.838194725 0.842778298 0.845970847 0.847763183 0.850256365 0.859886569 0.865974884 0.869179446 0.874800398 0.886636740 0.889143302 0.889915349 0.900913909 0.901139968 0.904304479 0.924250871 0.928323825 0.936876214 0.938271333 0.966411112 0.977464536 0.987458386 1.001934118 1.020414334 1.028856205 1.042744126 1.052948715 1.059114180 1.069299099 1.087054431 1.089180302 1.105539979 1.111995394 1.113054975 1.129380562 1.136573057 1.141332134 1.145672208 1.176893409 1.179218845 1.181912072 1.187694698 1.191677520 1.198769978 1.224996727 1.229085171 1.275062618 1.303108307 1.321455567 1.328517508 1.333503234 1.336741248 1.337893945 1.342043643 1.344750829 1.345452593 1.359985383 1.379762720 1.383546465 1.386220079 1.406154771 1.421348965 1.430853515 1.551518891 1.687132879 1.776966474</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">325</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34449159" y3="0.05286203" z3="-0.19660775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39183573" y3="0.16397967" z3="0.40990442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65237669" y3="0.43987409" z3="-0.34812366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73376906" y3="1.2375335" z3="-2.26675287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39267879" y3="0.43845728" z3="-1.18793973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73261485" y3="0.84945899" z3="-3.66489691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6394232" y3="1.75085823" z3="-3.13924921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38658422" y3="2.5958672" z3="-4.61795469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56514029" y3="1.25461469" z3="-4.37722499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50729988" y3="2.93212427" z3="-5.17622206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92599546" y3="-0.48078694" z3="-3.44223165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10180409" y3="0.05267494" z3="-1.00341266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40068919" y3="-1.09003204" z3="-2.000917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9297125" y3="-0.95485193" z3="-1.82706875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09927419" y3="-2.41631432" z3="-1.84522927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14454647" y3="-3.62175328" z3="0.67991124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.0165937" y3="-5.24164618" z3="-4.74259959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24451589" y3="-4.99012659" z3="-3.70327907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84165843" y3="-4.31341906" z3="-1.08026252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77902698" y3="-4.57758267" z3="-2.85212264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55872177" y3="-5.09118093" z3="-3.24286362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85802472" y3="-4.74790322" z3="-1.92678186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49260565" y3="-4.25387274" z3="-1.52429134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81057441" y3="-4.48837888" z3="-3.20104844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35705854" y3="-5.40764538" z3="-3.91792054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89337346" y3="-4.79543243" z3="-1.58105264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03233688" y3="-3.86804441" z3="0.24144134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17351752" y3="-3.65530003" z3="0.88504724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06029671" y3="-4.11972961" z3="0.45135482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16960957" y3="-3.51805713" z3="2.35184828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22972526" y3="-3.32748891" z3="5.14919396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36556093" y3="-3.72473528" z3="3.05482602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00339096" y3="-3.22240408" z3="3.07365046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03076798" y3="-3.12757959" z3="4.46196798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39451697" y3="-3.63195526" z3="4.44351642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27998152" y3="-3.96753036" z3="2.50632567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0438284" y3="-3.08721878" z3="2.56948423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10229856" y3="-2.91717794" z3="5.00033154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33239437" y3="-3.80442726" z3="4.97848404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25073862" y3="-3.26139652" z3="6.24055557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41133261" y3="-3.88436832" z3="-0.62113785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.16966563" y3="-3.38042424" z3="-1.0745787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52423287" y3="0.24930011" z3="-4.71389578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08089006" y3="-1.73156722" z3="0.02276459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91100451" y3="-0.98054777" z3="1.18504141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85056353" y3="-0.33060131" z3="1.52348179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3785546" y3="0.54889505" z3="1.22816898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46248118" y3="1.45411144" z3="-0.39469991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97932101" y3="-0.70197099" z3="1.39921414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36961605" y3="1.73480856" z3="2.67837503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.89019988" y3="-0.97076457" z3="2.07818768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66834149" y3="-0.35473792" z3="3.33704246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21722139" y3="0.76854207" z3="-1.22398948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3050517" y3="2.25047321" z3="-0.3867038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44618995" y3="1.93014244" z3="-0.5545239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01440118" y3="-1.06573554" z3="2.43912707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95013076" y3="-0.23600106" z3="1.15648894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8559744" y3="-1.54475336" z3="0.70044137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42232116" y3="1.19043719" z3="3.63804101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56328816" y3="2.32733484" z3="2.6785952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21562186" y3="2.44359322" z3="2.63277773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80781695" y3="-0.80897786" z3="3.8540878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.58567693" y3="-0.52915284" z3="3.91501553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49897122" y3="0.72757346" z3="3.21584465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84353901" y3="-0.70190059" z3="0.98689113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41671175" y3="-2.02881511" z3="0.84919696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76288915" y3="-2.6731967" z3="1.89207835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55339818" y3="-1.9779599" z3="3.07979993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03220257" y3="-0.68579225" z3="3.27378442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68547863" y3="-0.05478189" z3="2.21975426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52335072" y3="-2.5283593" z3="-0.11469971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36586134" y3="-3.68165554" z3="1.76904048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68996075" y3="-2.57563247" z3="4.10338666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84854958" y3="-0.17416478" z3="4.21888334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02861183" y3="0.9770817" z3="2.33423786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79122869" y3="0.46852341" z3="-4.28328307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77118148" y3="-0.49963407" z3="-4.45929893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42536218" y3="-1.69056051" z3="-5.08677176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14070353" y3="-1.91998291" z3="-5.56952523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83215747" y3="-0.94866155" z3="-5.37289096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03408201" y3="1.3908702" z3="-3.74979052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78835164" y3="-0.35476735" z3="-4.09402027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43729726" y3="-2.74008282" z3="-5.22305061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08856763" y3="-2.85965024" z3="-6.07307491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85274619" y3="-1.13327812" z3="-5.71250242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35973359" y3="-1.88042072" z3="5.04405733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31225952" y3="-3.71663364" z3="3.93544416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21442033" y3="-3.64466043" z3="-5.99932741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.43930424" y3="-2.65207713" z3="-4.54120345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07773895" y3="1.15918185" z3="-1.49811726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11728788" y3="1.54980794" z3="-2.47623629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44741298" y3="1.48406144" z3="-1.69772408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85836508" y3="2.1463071" z3="-2.82832356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17359696" y3="1.18501808" z3="-0.93548717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91552122" y3="2.38503499" z3="-2.97386721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57847097" y3="2.21678026" z3="-3.64532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91096886" y3="2.50623364" z3="-3.81658663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85739443" y3="2.49080763" z3="-4.4188854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24315649" y3="3.01345144" z3="-4.72718151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4102695" y3="3.15491375" z3="-3.33703571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29441597" y3="3.5684612" z3="-4.12300656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.219894" y3="4.16500277" z3="-2.74450734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97005987" y3="5.49823422" z3="-2.96756506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04919859" y3="3.87509832" z3="-2.09732996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60854079" y3="6.25288478" z3="-2.49999454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07050047" y3="4.95478047" z3="-4.3478439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89255237" y3="5.90282103" z3="-3.79086412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21845566" y3="5.25344491" z3="-4.96641431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70887702" y3="6.96636777" z3="-3.9675628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47751045" y3="-2.21027572" z3="-0.30194678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44459913" y3="-3.00106015" z3="-1.07076803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00836925" y3="-2.59488475" z3="0.58390054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09210469" y3="-1.39035933" z3="-0.71979794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17251891" y3="-1.43356088" z3="-1.14358157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30809466" y3="-0.39256935" z3="-1.49031778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09684045" y3="-1.55847401" z3="-0.93485302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41043083" y3="-2.08659188" z3="-1.99689262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3445,.0529,-.1966;7.3918,.164,.4099;6.6524,.4399,-.3481;4.7338,1.2375,-2.2668;4.3927,.4385,-1.1879;2.7326,.8495,-3.6649;3.6394,1.7509,-3.1392;1.3866,2.5959,-4.618;1.5651,1.2546,-4.3772;.5073,2.9321,-5.1762;2.926,-.4808,-3.4422;3.1018,.0527,-1.0034;2.4007,-1.09,-2.0009;.9297,-.9549,-1.8271;3.0993,-2.4163,-1.8452;-.1445,-3.6218,.6799;-.0166,-5.2416,-4.7426;-.2445,-4.9901,-3.7033;-.8417,-4.3134,-1.0803;.779,-4.5776,-2.8521;-1.5587,-5.0912,-3.2429;-1.858,-4.7479,-1.9268;.4926,-4.2539,-1.5243;1.8106,-4.4884,-3.201;-2.3571,-5.4076,-3.9179;-2.8934,-4.7954,-1.5811;-1.0323,-3.868,.2414;-2.1735,-3.6553,.885;-3.0603,-4.1197,.4514;-2.1696,-3.5181,2.3518;-2.2297,-3.3275,5.1492;-3.3656,-3.7247,3.0548;-1.0034,-3.2224,3.0737;-1.0308,-3.1276,4.462;-3.3945,-3.632,4.4435;-4.28,-3.9675,2.5063;-.0438,-3.0872,2.5695;-.1023,-2.9172,5.0003;-4.3324,-3.8044,4.9785;-2.2507,-3.2614,6.2406;1.4113,-3.8844,-.6211;2.1697,-3.3804,-1.0746;.5242,.2493,-4.7139;-3.0809,-1.7316,.0228;-2.911,-.9805,1.185;-1.8506,-.3306,1.5235;-.3786,.5489,1.2282;-.4625,1.4541,-.3947;.9793,-.702,1.3992;-.3696,1.7348,2.6784;-3.8902,-.9708,2.0782;-3.6683,-.3547,3.337;-.2172,.7685,-1.224;.3051,2.2505,-.3867;-1.4462,1.9301,-.5545;1.0144,-1.0657,2.4391;1.9501,-.236,1.1565;.856,-1.5448,.7004;-.4223,1.1904,3.638;.5633,2.3273,2.6786;-1.2156,2.4436,2.6328;-2.8078,-.809,3.8541;-4.5857,-.5292,3.915;-3.499,.7276,3.2158;4.8435,-.7019,.9869;4.4167,-2.0288,.8492;3.7629,-2.6732,1.8921;3.5534,-1.978,3.0798;4.0322,-.6858,3.2738;4.6855,-.0548,2.2198;4.5234,-2.5284,-.1147;3.3659,-3.6817,1.769;2.69,-2.5756,4.1034;3.8485,-.1742,4.2189;5.0286,.9771,2.3342;-.7912,.4685,-4.2833;-1.7712,-.4996,-4.4593;-1.4254,-1.6906,-5.0868;-.1407,-1.92,-5.5695;.8322,-.9487,-5.3729;-1.0341,1.3909,-3.7498;-2.7884,-.3548,-4.094;-2.4373,-2.7401,-5.2231;.0886,-2.8597,-6.0731;1.8527,-1.1333,-5.7125;2.3597,-1.8804,5.0441;2.3123,-3.7166,3.9354;-2.2144,-3.6447,-5.9993;-3.4393,-2.6521,-4.5412;7.0777,1.1592,-1.4981;6.1173,1.5498,-2.4762;8.4474,1.4841,-1.6977;8.8584,2.1463,-2.8283;9.1736,1.185,-.9355;9.9155,2.385,-2.9739;6.5785,2.2168,-3.6453;7.911,2.5062,-3.8166;5.8574,2.4908,-4.4189;8.2432,3.0135,-4.7272;3.4103,3.1549,-3.337;2.2944,3.5685,-4.123;4.2199,4.165,-2.7445;3.9701,5.4982,-2.9676;5.0492,3.8751,-2.0973;4.6085,6.2529,-2.5;2.0705,4.9548,-4.3478;2.8926,5.9028,-3.7909;1.2185,5.2534,-4.9664;2.7089,6.9664,-3.9676;-4.4775,-2.2103,-.3019;-4.4446,-3.0011,-1.0708;-5.0084,-2.5949,.5839;-5.0921,-1.3904,-.7198;-2.1725,-1.4336,-1.1436;-2.3081,-.3926,-1.4903;-1.0968,-1.5585,-.9349;-2.4104,-2.0866,-1.9969;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423076844</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000846871966 0.000176505477 0.019268966709 0.005359813658</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030789712 -0.000112629 0.000076692 0.000152931 0.000201393 0.000323169 0.000376174 0.000430718 0.000559588 0.000814075 0.000880371 0.000910957 0.001043954 0.001199236 0.001441954 0.001495449 0.001564226 0.001706525 0.001740351 0.001924664 0.001931258 0.002216185 0.002330977 0.002528632 0.002680673 0.002986106 0.003029321 0.003084831 0.003657028 0.003910565 0.004424404 0.004670100 0.004785413 0.005099188 0.006001282 0.006088196 0.006300819 0.006679365 0.006880629 0.007540728 0.007967409 0.008237205 0.008413807 0.009427628 0.009482667 0.010027387 0.010105415 0.011202061 0.011907469 0.012226732 0.013003305 0.013153745 0.014365818 0.014877185 0.015380612 0.015826957 0.015983512 0.016511023 0.016784020 0.017432612 0.018237349 0.018852157 0.018975013 0.019657765 0.020163524 0.020605044 0.021226149 0.021394803 0.021704048 0.023048895 0.023496392 0.026607779 0.026907097 0.028139916 0.028378041 0.029632474 0.030543924 0.031650828 0.033253387 0.033748859 0.034166536 0.035750213 0.036986315 0.037267939 0.038794648 0.039664629 0.040187197 0.041140544 0.042596762 0.044722542 0.045799277 0.047208691 0.048074072 0.049287342 0.050547408 0.051089182 0.051314102 0.051832840 0.052502948 0.052825104 0.052968090 0.053271591 0.054888505 0.054998166 0.056262210 0.056432265 0.056615873 0.057075012 0.057247703 0.059243523 0.060657747 0.061085900 0.061915426 0.062417020 0.063447722 0.064542258 0.065333034 0.066177434 0.066622044 0.068575196 0.069308354 0.070293931 0.072842160 0.074502655 0.074804953 0.076536181 0.079322983 0.084575028 0.087000436 0.087303158 0.087761269 0.089820754 0.090718826 0.091678989 0.094321652 0.095224795 0.095945085 0.096510722 0.097878634 0.098853850 0.100245862 0.100858348 0.102458789 0.103232820 0.103694337 0.104455949 0.104623402 0.105382549 0.106381926 0.107118898 0.108264654 0.110161882 0.111220380 0.112558631 0.113568057 0.115153592 0.116298412 0.116879320 0.118782021 0.121393604 0.122557028 0.123874024 0.125541086 0.126307530 0.126440688 0.126819894 0.127904038 0.132208315 0.135154226 0.135953632 0.143199601 0.144127771 0.147170976 0.147609108 0.149828907 0.151401501 0.154695528 0.154847133 0.156753705 0.161321831 0.162033658 0.173836462 0.174485719 0.182259091 0.185608638 0.186586160 0.189713756 0.190461082 0.194520604 0.195866258 0.199024252 0.200443241 0.205271461 0.207208932 0.207569643 0.210303910 0.216870030 0.217477610 0.218010641 0.220812586 0.220934607 0.225441991 0.226805188 0.232429409 0.235231737 0.235764991 0.236127908 0.244796364 0.256146249 0.257392738 0.264019909 0.269972702 0.280792628 0.283934384 0.286411956 0.291992770 0.297089009 0.304595303 0.306048580 0.307389770 0.314692676 0.316847167 0.317460811 0.322272233 0.330207520 0.333157990 0.351840154 0.353062228 0.355503233 0.356080187 0.360106750 0.363173318 0.364624765 0.384031904 0.386072668 0.392274940 0.410689910 0.426142096 0.431298893 0.462535075 0.469592543 0.479221596 0.484631036 0.484713195 0.487522060 0.491502992 0.509932991 0.515514111 0.535318350 0.569556863 0.575423325 0.591290174 0.594308207 0.607479965 0.608508868 0.645049360 0.648012701 0.649895992 0.674535633 0.678471029 0.688294246 0.693528440 0.694206547 0.700414863 0.705033984 0.718572800 0.742337434 0.751458232 0.759483971 0.772217396 0.774842615 0.779821584 0.811085145 0.816700252 0.820415268 0.823314902 0.823785973 0.832456793 0.835102670 0.838203901 0.842782321 0.845970908 0.847764437 0.850257370 0.859887027 0.865980969 0.869179985 0.874813213 0.886639902 0.889162632 0.889924877 0.900913962 0.901141802 0.904309681 0.924251109 0.928324139 0.936883083 0.938272906 0.966413524 0.977467117 0.987460697 1.001943341 1.020414699 1.028856381 1.042757381 1.052950992 1.059122600 1.069300722 1.087054689 1.089180712 1.105550688 1.111999041 1.113062677 1.129433229 1.136573791 1.141340192 1.145678119 1.176895833 1.179220548 1.181915111 1.187700960 1.191680712 1.198781138 1.225021133 1.229088094 1.275074728 1.303108650 1.321456275 1.328518111 1.333507113 1.336741144 1.337893713 1.342040954 1.344753311 1.345455045 1.359985577 1.379767664 1.383546757 1.386223847 1.406103337 1.421351681 1.430860598 1.551520171 1.687162478 1.776981098</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">326</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34502868" y3="0.04808517" z3="-0.19514772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3928485" y3="0.16036327" z3="0.40937937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.6524151" y3="0.43628321" z3="-0.34770356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73136782" y3="1.23516627" z3="-2.26324759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39201249" y3="0.43383514" z3="-1.18530318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72944254" y3="0.84685806" z3="-3.66035355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63567031" y3="1.74869028" z3="-3.1339307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38067925" y3="2.59317301" z3="-4.60941862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5608317" y3="1.25170642" z3="-4.37111648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50068569" y3="2.92939138" z3="-5.16655631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92501609" y3="-0.48364312" z3="-3.44029226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10162023" y3="0.04573594" z3="-1.00048336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40208882" y3="-1.09679971" z3="-1.99952736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93088449" y3="-0.96494048" z3="-1.82424056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10335836" y3="-2.42196167" z3="-1.84682645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14251754" y3="-3.61648085" z3="0.67480564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00995134" y3="-5.25218553" z3="-4.74247846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.239311" y3="-4.9962597" z3="-3.70455532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8394579" y3="-4.30950795" z3="-1.08474788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78398061" y3="-4.58571528" z3="-2.85228101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55517915" y3="-5.08978581" z3="-3.24684371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85608134" y3="-4.74116482" z3="-1.93255946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49598354" y3="-4.25708983" z3="-1.52602503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81667226" y3="-4.50210713" z3="-3.19891788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35321359" y3="-5.4050397" z3="-3.92258612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89267063" y3="-4.78237553" z3="-1.5892606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03034747" y3="-3.86204924" z3="0.23612438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17138875" y3="-3.65099642" z3="0.88039847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05803793" y3="-4.11590148" z3="0.44673822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16701155" y3="-3.5146444" z3="2.34726684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22574089" y3="-3.32786183" z3="5.14491288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36251446" y3="-3.72352497" z3="3.05063896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00105282" y3="-3.21766896" z3="3.06866915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02765029" y3="-3.12506045" z3="4.45721062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39108725" y3="-3.63220675" z3="4.4394018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27632393" y3="-3.96787842" z3="2.5025276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04234152" y3="-3.07954336" z3="2.56396481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09912956" y3="-2.91442514" z3="4.99559256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32851123" y3="-3.80657418" z3="4.97463122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24616117" y3="-3.26336682" z3="6.23638512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41513732" y3="-3.89022933" z3="-0.62185362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17496052" y3="-3.3878352" z3="-1.07514024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52082639" y3="0.24641912" z3="-4.7089433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08206208" y3="-1.72706763" z3="0.02056298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.908009" y3="-0.97675834" z3="1.18262454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84616237" y3="-0.32759349" z3="1.51750145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37676594" y3="0.55611701" z3="1.22318109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45668077" y3="1.45417638" z3="-0.40400708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98365422" y3="-0.69052356" z3="1.4046619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37601019" y3="1.74909503" z3="2.66764415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88391238" y3="-0.96718611" z3="2.07943778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65772281" y3="-0.35223727" z3="3.33772518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21335524" y3="0.7642641" z3="-1.23021725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31370966" y3="2.2478542" z3="-0.39905824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43858658" y3="1.93288751" z3="-0.56657638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01492209" y3="-1.05365337" z3="2.4457303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95343939" y3="-0.22242539" z3="1.16523397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86294453" y3="-1.53459603" z3="0.7058543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.43173852" y3="1.20970615" z3="3.62972051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.55648218" y3="2.34250071" z3="2.66880733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.22253436" y3="2.456676" z3="2.61504157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79723576" y3="-0.80847325" z3="3.85248706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57402778" y3="-0.52509387" z3="3.91764125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48588466" y3="0.7299702" z3="3.21681016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84551688" y3="-0.70704755" z3="0.98881569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41589137" y3="-2.03292333" z3="0.85114911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76174354" y3="-2.67639418" z3="1.8943538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5544038" y3="-1.98125193" z3="3.08179462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03741639" y3="-0.69059165" z3="3.2765723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69108541" y3="-0.06043527" z3="2.22237272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51829328" y3="-2.53152528" z3="-0.11473753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36226342" y3="-3.68382505" z3="1.77139597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69086013" y3="-2.57754175" z3="4.10601125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85758159" y3="-0.17962567" z3="4.22335516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03747186" y3="0.97046084" z3="2.33746545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79613807" y3="0.46607142" z3="-4.28387114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77564727" y3="-0.50190548" z3="-4.46183699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42758786" y3="-1.69340872" z3="-5.08760552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14136235" y3="-1.923503" z3="-5.56625875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83101215" y3="-0.95217816" z3="-5.36628593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0410553" y3="1.38897401" z3="-3.75155561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79430764" y3="-0.35646518" z3="-4.10146419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43927494" y3="-2.74324005" z3="-5.22775044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08886398" y3="-2.86359221" z3="-6.06731786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85264892" y3="-1.13744671" z3="-5.70192296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36595224" y3="-1.88292505" z3="5.04944121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.30868087" y3="-3.71677967" z3="3.93684975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2145858" y3="-3.6470826" z3="-6.0040555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44299857" y3="-2.65588496" z3="-4.54850331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07607581" y3="1.15676123" z3="-1.49759484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11437893" y3="1.54846773" z3="-2.47399591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44524039" y3="1.48185998" z3="-1.6987739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8545988" y3="2.14637758" z3="-2.82904019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17242043" y3="1.18179476" z3="-0.93795273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91153183" y3="2.38586212" z3="-2.97573487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57367413" y3="2.21683298" z3="-3.64302534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90583758" y3="2.50720414" z3="-3.81564683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8513287" y3="2.49083002" z3="-4.41549581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23663157" y3="3.01446549" z3="-4.72627693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40520899" y3="3.15255407" z3="-3.32987489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28806071" y3="3.56590726" z3="-4.11407076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21490097" y3="4.1626067" z3="-2.73738351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96368007" y3="5.495829" z3="-2.95863255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04535403" y3="3.87278686" z3="-2.09165626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60192308" y3="6.2509089" z3="-2.49063306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06265944" y3="4.95221322" z3="-4.33696843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8847206" y3="5.90031414" z3="-3.78002325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20961668" y3="5.25073811" z3="-4.95419387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70007636" y3="6.96380899" z3="-3.95535472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47941844" y3="-2.20569765" z3="-0.30031135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4479645" y3="-2.99756037" z3="-1.0676951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00897482" y3="-2.58893447" z3="0.58666416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09396098" y3="-1.38601772" z3="-0.71846355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17703349" y3="-1.42926487" z3="-1.14830401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31396819" y3="-0.38827591" z3="-1.49488335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10099113" y3="-1.55367614" z3="-0.94155657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4159653" y3="-2.08248461" z3="-2.00068598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.345,.0481,-.1951;7.3928,.1604,.4094;6.6524,.4363,-.3477;4.7314,1.2352,-2.2632;4.392,.4338,-1.1853;2.7294,.8469,-3.6604;3.6357,1.7487,-3.1339;1.3807,2.5932,-4.6094;1.5608,1.2517,-4.3711;.5007,2.9294,-5.1666;2.925,-.4836,-3.4403;3.1016,.0457,-1.0005;2.4021,-1.0968,-1.9995;.9309,-.9649,-1.8242;3.1034,-2.422,-1.8468;-.1425,-3.6165,.6748;-.01,-5.2522,-4.7425;-.2393,-4.9963,-3.7046;-.8395,-4.3095,-1.0847;.784,-4.5857,-2.8523;-1.5552,-5.0898,-3.2468;-1.8561,-4.7412,-1.9326;.496,-4.2571,-1.526;1.8167,-4.5021,-3.1989;-2.3532,-5.405,-3.9226;-2.8927,-4.7824,-1.5893;-1.0303,-3.862,.2361;-2.1714,-3.651,.8804;-3.058,-4.1159,.4467;-2.167,-3.5146,2.3473;-2.2257,-3.3279,5.1449;-3.3625,-3.7235,3.0506;-1.0011,-3.2177,3.0687;-1.0277,-3.1251,4.4572;-3.3911,-3.6322,4.4394;-4.2763,-3.9679,2.5025;-.0423,-3.0795,2.564;-.0991,-2.9144,4.9956;-4.3285,-3.8066,4.9746;-2.2462,-3.2634,6.2364;1.4151,-3.8902,-.6219;2.175,-3.3878,-1.0751;.5208,.2464,-4.7089;-3.0821,-1.7271,.0206;-2.908,-.9768,1.1826;-1.8462,-.3276,1.5175;-.3768,.5561,1.2232;-.4567,1.4542,-.404;.9837,-.6905,1.4047;-.376,1.7491,2.6676;-3.8839,-.9672,2.0794;-3.6577,-.3522,3.3377;-.2134,.7643,-1.2302;.3137,2.2479,-.3991;-1.4386,1.9329,-.5666;1.0149,-1.0537,2.4457;1.9534,-.2224,1.1652;.8629,-1.5346,.7059;-.4317,1.2097,3.6297;.5565,2.3425,2.6688;-1.2225,2.4567,2.615;-2.7972,-.8085,3.8525;-4.574,-.5251,3.9176;-3.4859,.73,3.2168;4.8455,-.707,.9888;4.4159,-2.0329,.8511;3.7617,-2.6764,1.8944;3.5544,-1.9813,3.0818;4.0374,-.6906,3.2766;4.6911,-.0604,2.2224;4.5183,-2.5315,-.1147;3.3623,-3.6838,1.7714;2.6909,-2.5775,4.106;3.8576,-.1796,4.2234;5.0375,.9705,2.3375;-.7961,.4661,-4.2839;-1.7756,-.5019,-4.4618;-1.4276,-1.6934,-5.0876;-.1414,-1.9235,-5.5663;.831,-.9522,-5.3663;-1.0411,1.389,-3.7516;-2.7943,-.3565,-4.1015;-2.4393,-2.7432,-5.2278;.0889,-2.8636,-6.0673;1.8526,-1.1374,-5.7019;2.366,-1.8829,5.0494;2.3087,-3.7168,3.9368;-2.2146,-3.6471,-6.0041;-3.443,-2.6559,-4.5485;7.0761,1.1568,-1.4976;6.1144,1.5485,-2.474;8.4452,1.4819,-1.6988;8.8546,2.1464,-2.829;9.1724,1.1818,-.938;9.9115,2.3859,-2.9757;6.5737,2.2168,-3.643;7.9058,2.5072,-3.8156;5.8513,2.4908,-4.4155;8.2366,3.0145,-4.7263;3.4052,3.1526,-3.3299;2.2881,3.5659,-4.1141;4.2149,4.1626,-2.7374;3.9637,5.4958,-2.9586;5.0454,3.8728,-2.0917;4.6019,6.2509,-2.4906;2.0627,4.9522,-4.337;2.8847,5.9003,-3.78;1.2096,5.2507,-4.9542;2.7001,6.9638,-3.9554;-4.4794,-2.2057,-.3003;-4.448,-2.9976,-1.0677;-5.009,-2.5889,.5867;-5.094,-1.386,-.7185;-2.177,-1.4293,-1.1483;-2.314,-.3883,-1.4949;-1.101,-1.5537,-.9416;-2.416,-2.0825,-2.0007;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424822021</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000721066302 0.000132889798 0.016190671242 0.005309589714</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030789819 -0.000138036 0.000085552 0.000158810 0.000177980 0.000325236 0.000414512 0.000444200 0.000595578 0.000811697 0.000883810 0.000915435 0.001050756 0.001200173 0.001444127 0.001494780 0.001562592 0.001707275 0.001740567 0.001923436 0.001934286 0.002212351 0.002330640 0.002528915 0.002682803 0.002986510 0.003029726 0.003083877 0.003657212 0.003912351 0.004428492 0.004670138 0.004783589 0.005100160 0.005999916 0.006088635 0.006299689 0.006679298 0.006875599 0.007537495 0.007972125 0.008238780 0.008413143 0.009428915 0.009482984 0.010029518 0.010105824 0.011210453 0.011907219 0.012225052 0.013005355 0.013153757 0.014369411 0.014877013 0.015376462 0.015825680 0.015980505 0.016507876 0.016787515 0.017430962 0.018236389 0.018858997 0.018970255 0.019661136 0.020163250 0.020603088 0.021224239 0.021394472 0.021699489 0.023049796 0.023493348 0.026610842 0.026907007 0.028139825 0.028379062 0.029633249 0.030547081 0.031652268 0.033253976 0.033749247 0.034165843 0.035751881 0.036972021 0.037265008 0.038784155 0.039662717 0.040189332 0.041140955 0.042597229 0.044721618 0.045800202 0.047214146 0.048080091 0.049287943 0.050553714 0.051088994 0.051314099 0.051832717 0.052503841 0.052825879 0.052968121 0.053271842 0.054894800 0.055000420 0.056262543 0.056433761 0.056616275 0.057075303 0.057247900 0.059244519 0.060658155 0.061087490 0.061917377 0.062417738 0.063447871 0.064542447 0.065332581 0.066177434 0.066623584 0.068575617 0.069309548 0.070294024 0.072847105 0.074501877 0.074805125 0.076536246 0.079324485 0.084577583 0.087000985 0.087303452 0.087762099 0.089825346 0.090719906 0.091681053 0.094326382 0.095251851 0.095946190 0.096513031 0.097878673 0.098853871 0.100245956 0.100860171 0.102462209 0.103233072 0.103697210 0.104457882 0.104626052 0.105389989 0.106379931 0.107118866 0.108264632 0.110163331 0.111221720 0.112562973 0.113569590 0.115153268 0.116298285 0.116878662 0.118782705 0.121393888 0.122557306 0.123874196 0.125541124 0.126309603 0.126440825 0.126820233 0.127907008 0.132208793 0.135157783 0.135953483 0.143206775 0.144131481 0.147186606 0.147608780 0.149829505 0.151404296 0.154695242 0.154847680 0.156752783 0.161324297 0.162035756 0.173838235 0.174485855 0.182259187 0.185614194 0.186587028 0.189715776 0.190462321 0.194520903 0.195878535 0.199030759 0.200443134 0.205276401 0.207209332 0.207569762 0.210304063 0.216870656 0.217478106 0.218010729 0.220823040 0.220941988 0.225442887 0.226805237 0.232429599 0.235236478 0.235765958 0.236128532 0.244796370 0.256146518 0.257392710 0.264020517 0.269973080 0.280792986 0.283936253 0.286412976 0.291992871 0.297089141 0.304597142 0.306048715 0.307393374 0.314692931 0.316847721 0.317462695 0.322272373 0.330208262 0.333163894 0.351839762 0.353062559 0.355504916 0.356080854 0.360107074 0.363173986 0.364624674 0.384029470 0.386074308 0.392278721 0.410689794 0.426145603 0.431302791 0.462535256 0.469593613 0.479224073 0.484631130 0.484713768 0.487521749 0.491504640 0.509933061 0.515514806 0.535320651 0.569556702 0.575424420 0.591297434 0.594308829 0.607480642 0.608509344 0.645056745 0.648013169 0.649898417 0.674535836 0.678471016 0.688300402 0.693532914 0.694208862 0.700418843 0.705059800 0.718572697 0.742337332 0.751459176 0.759484261 0.772217320 0.774842666 0.779822727 0.811097710 0.816710707 0.820452950 0.823315718 0.823790457 0.832459520 0.835102940 0.838209179 0.842787151 0.845971225 0.847764493 0.850260426 0.859889776 0.865986407 0.869183670 0.874825399 0.886640045 0.889166422 0.889930294 0.900914113 0.901144805 0.904318438 0.924253800 0.928324863 0.936884509 0.938277561 0.966420022 0.977488262 0.987465952 1.001946880 1.020415614 1.028857333 1.042764925 1.052955386 1.059124512 1.069311594 1.087054763 1.089183635 1.105558528 1.112014241 1.113064194 1.129446365 1.136574400 1.141346749 1.145679245 1.176897033 1.179223270 1.181920786 1.187702166 1.191683193 1.198784372 1.225036890 1.229088807 1.275086395 1.303110015 1.321457308 1.328518050 1.333508053 1.336741585 1.337902307 1.342040723 1.344754665 1.345456376 1.359987677 1.379768071 1.383548147 1.386229375 1.406117557 1.421352862 1.430859550 1.551521022 1.687167774 1.776983038</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">327</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34529602" y3="0.04655882" z3="-0.19306675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39328702" y3="0.1612792" z3="0.41026293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65210502" y3="0.43591195" z3="-0.34655381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7288416" y3="1.23181099" z3="-2.2611722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39129579" y3="0.43051278" z3="-1.18299435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72605298" y3="0.84153037" z3="-3.65639402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63153383" y3="1.74417828" z3="-3.13053001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.37309394" y3="2.5867764" z3="-4.60157823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.55592456" y3="1.2452751" z3="-4.36520875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.49202481" y3="2.92207088" z3="-5.15757076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92403398" y3="-0.48871636" z3="-3.43732869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10158776" y3="0.04096084" z3="-0.99778987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40339407" y3="-1.10270426" z3="-1.99626781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93208658" y3="-0.97280496" z3="-1.82044119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10662025" y3="-2.42676874" z3="-1.84341928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14218308" y3="-3.61334564" z3="0.66901589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00693234" y3="-5.25527063" z3="-4.74567785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23704264" y3="-4.9974983" z3="-3.7083289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8390221" y3="-4.30632999" z3="-1.09009879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78660002" y3="-4.59076784" z3="-2.85435294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55388765" y3="-5.08553886" z3="-3.25294346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85577323" y3="-4.73439858" z3="-1.93948652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49759695" y3="-4.26015246" z3="-1.52884022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82047113" y3="-4.51219779" z3="-3.19914684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35221345" y3="-5.39806035" z3="-3.92986472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89316349" y3="-4.7709191" z3="-1.5983488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03029184" y3="-3.8573007" z3="0.23023921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17096749" y3="-3.6455569" z3="0.87470234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05808639" y3="-4.1085269" z3="0.4401764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16665248" y3="-3.51092655" z3="2.34170493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22598351" y3="-3.32791998" z3="5.13957821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36252523" y3="-3.71881126" z3="3.04445958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00018893" y3="-3.21736399" z3="3.06394604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02722477" y3="-3.12635527" z3="4.45254868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39112555" y3="-3.62977907" z3="4.43338946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27721179" y3="-3.95976909" z3="2.49555125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04088045" y3="-3.08058522" z3="2.55974716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09872638" y3="-2.91770746" z3="4.99158864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32896522" y3="-3.80330301" z3="4.9681077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24653739" y3="-3.26500931" z3="6.23113282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41652523" y3="-3.89707429" z3="-0.62304065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17669072" y3="-3.39439879" z3="-1.07427645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.51732379" y3="0.23889778" z3="-4.70535406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08010537" y3="-1.71839476" z3="0.01849173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90358294" y3="-0.9689639" z3="1.18062004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8404724" y3="-0.3211107" z3="1.51433827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36884834" y3="0.55874737" z3="1.22103392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44434306" y3="1.45535317" z3="-0.40691783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98718923" y3="-0.69196242" z3="1.40588323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36615716" y3="1.75357579" z3="2.66397505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87839442" y3="-0.9585388" z3="2.07859414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64832808" y3="-0.34670965" z3="3.33802511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2044446" y3="0.76365342" z3="-1.23260088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32990033" y3="2.24536565" z3="-0.40258248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4239847" y3="1.93863815" z3="-0.56970566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01513093" y3="-1.05367047" z3="2.44706949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95985479" y3="-0.2277022" z3="1.16802867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86641729" y3="-1.53587206" z3="0.70791055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42456561" y3="1.21562754" z3="3.62688011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56765895" y3="2.3446274" z3="2.665138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21064523" y3="2.46345069" z3="2.60946392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78701671" y3="-0.80553799" z3="3.8497359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56344124" y3="-0.51943405" z3="3.91991673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47557052" y3="0.73530269" z3="3.21910924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84663627" y3="-0.70780134" z3="0.99169322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41891759" y3="-2.03462979" z3="0.85573601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76491517" y3="-2.67717761" z3="1.89964765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55584782" y3="-1.98013963" z3="3.08635588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03624859" y3="-0.68833683" z3="3.27893395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68995075" y3="-0.05926206" z3="2.22402793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52509639" y3="-2.53551222" z3="-0.10748527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36730882" y3="-3.68560709" z3="1.77819965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69144869" y3="-2.57560891" z3="4.11037242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85294781" y3="-0.17522666" z3="4.22322806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03389991" y3="0.97248233" z3="2.33712045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.80090117" y3="0.45837127" z3="-4.28322075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.78002703" y3="-0.5093808" z3="-4.4657837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4304364" y3="-1.70012882" z3="-5.09133706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14262632" y3="-1.930068" z3="-5.56548947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82927433" y3="-0.95930473" z3="-5.36209512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04723068" y3="1.38093386" z3="-3.75176076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79965925" y3="-0.36413801" z3="-4.10755225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4415469" y3="-2.74910062" z3="-5.23531547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08955474" y3="-2.86977798" z3="-6.06759362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85204235" y3="-1.14440089" z3="-5.69459791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3589349" y3="-1.87781937" z3="5.04827346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31538412" y3="-3.7174378" z3="3.9454946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21676625" y3="-3.64833092" z3="-6.01694234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44440066" y3="-2.66636239" z3="-4.55437825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07417677" y3="1.1568715" z3="-1.49673919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11128713" y3="1.54729748" z3="-2.47252973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44293974" y3="1.48433047" z3="-1.69856565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85056865" y3="2.14899873" z3="-2.82895644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17114023" y3="1.18528498" z3="-0.93825476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90705938" y3="2.38960745" z3="-2.97624953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56901609" y3="2.21719853" z3="-3.64133043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90063429" y3="2.5091165" z3="-3.81470779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84592498" y3="2.49127294" z3="-4.41299807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23017756" y3="3.01839482" z3="-4.72507295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.3981911" y3="3.14809931" z3="-3.3241363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.27911163" y3="3.56059707" z3="-4.10601082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20688292" y3="4.1589204" z3="-2.73154708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95283137" y3="5.49201658" z3="-2.95069545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03892296" y3="3.86973511" z3="-2.0875826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59079309" y3="6.24730678" z3="-2.48333279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.05062323" y3="4.94684993" z3="-4.32662544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.87176762" y3="5.89570527" z3="-3.76975798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.19595946" y3="5.24465468" z3="-4.94198967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.6846959" y3="6.95918514" z3="-3.94327972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47882485" y3="-2.19473471" z3="-0.30029595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45067344" y3="-2.98586608" z3="-1.06901016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00670642" y3="-2.57815426" z3="0.58777545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09375646" y3="-1.37386668" z3="-0.71581942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17576021" y3="-1.42202927" z3="-1.15115207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31178323" y3="-0.38114856" z3="-1.49830276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.09936593" y3="-1.54788511" z3="-0.94577758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41703562" y3="-2.07567414" z3="-2.00310824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3453,.0466,-.1931;7.3933,.1613,.4103;6.6521,.4359,-.3466;4.7288,1.2318,-2.2612;4.3913,.4305,-1.183;2.7261,.8415,-3.6564;3.6315,1.7442,-3.1305;1.3731,2.5868,-4.6016;1.5559,1.2453,-4.3652;.492,2.9221,-5.1576;2.924,-.4887,-3.4373;3.1016,.041,-.9978;2.4034,-1.1027,-1.9963;.9321,-.9728,-1.8204;3.1066,-2.4268,-1.8434;-.1422,-3.6133,.669;-.0069,-5.2553,-4.7457;-.237,-4.9975,-3.7083;-.839,-4.3063,-1.0901;.7866,-4.5908,-2.8544;-1.5539,-5.0855,-3.2529;-1.8558,-4.7344,-1.9395;.4976,-4.2602,-1.5288;1.8205,-4.5122,-3.1991;-2.3522,-5.3981,-3.9299;-2.8932,-4.7709,-1.5983;-1.0303,-3.8573,.2302;-2.171,-3.6456,.8747;-3.0581,-4.1085,.4402;-2.1667,-3.5109,2.3417;-2.226,-3.3279,5.1396;-3.3625,-3.7188,3.0445;-1.0002,-3.2174,3.0639;-1.0272,-3.1264,4.4525;-3.3911,-3.6298,4.4334;-4.2772,-3.9598,2.4956;-.0409,-3.0806,2.5597;-.0987,-2.9177,4.9916;-4.329,-3.8033,4.9681;-2.2465,-3.265,6.2311;1.4165,-3.8971,-.623;2.1767,-3.3944,-1.0743;.5173,.2389,-4.7054;-3.0801,-1.7184,.0185;-2.9036,-.969,1.1806;-1.8405,-.3211,1.5143;-.3688,.5587,1.221;-.4443,1.4554,-.4069;.9872,-.692,1.4059;-.3662,1.7536,2.664;-3.8784,-.9585,2.0786;-3.6483,-.3467,3.338;-.2044,.7637,-1.2326;.3299,2.2454,-.4026;-1.424,1.9386,-.5697;1.0151,-1.0537,2.4471;1.9599,-.2277,1.168;.8664,-1.5359,.7079;-.4246,1.2156,3.6269;.5677,2.3446,2.6651;-1.2106,2.4635,2.6095;-2.787,-.8055,3.8497;-4.5634,-.5194,3.9199;-3.4756,.7353,3.2191;4.8466,-.7078,.9917;4.4189,-2.0346,.8557;3.7649,-2.6772,1.8996;3.5558,-1.9801,3.0864;4.0362,-.6883,3.2789;4.69,-.0593,2.224;4.5251,-2.5355,-.1075;3.3673,-3.6856,1.7782;2.6914,-2.5756,4.1104;3.8529,-.1752,4.2232;5.0339,.9725,2.3371;-.8009,.4584,-4.2832;-1.78,-.5094,-4.4658;-1.4304,-1.7001,-5.0913;-.1426,-1.9301,-5.5655;.8293,-.9593,-5.3621;-1.0472,1.3809,-3.7518;-2.7997,-.3641,-4.1076;-2.4415,-2.7491,-5.2353;.0896,-2.8698,-6.0676;1.852,-1.1444,-5.6946;2.3589,-1.8778,5.0483;2.3154,-3.7174,3.9455;-2.2168,-3.6483,-6.0169;-3.4444,-2.6664,-4.5544;7.0742,1.1569,-1.4967;6.1113,1.5473,-2.4725;8.4429,1.4843,-1.6986;8.8506,2.149,-2.829;9.1711,1.1853,-.9383;9.9071,2.3896,-2.9762;6.569,2.2172,-3.6413;7.9006,2.5091,-3.8147;5.8459,2.4913,-4.413;8.2302,3.0184,-4.7251;3.3982,3.1481,-3.3241;2.2791,3.5606,-4.106;4.2069,4.1589,-2.7315;3.9528,5.492,-2.9507;5.0389,3.8697,-2.0876;4.5908,6.2473,-2.4833;2.0506,4.9468,-4.3266;2.8718,5.8957,-3.7698;1.196,5.2447,-4.942;2.6847,6.9592,-3.9433;-4.4788,-2.1947,-.3003;-4.4507,-2.9859,-1.069;-5.0067,-2.5782,.5878;-5.0938,-1.3739,-.7158;-2.1758,-1.422,-1.1512;-2.3118,-.3811,-1.4983;-1.0994,-1.5479,-.9458;-2.417,-2.0757,-2.0031;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423585312</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000867272712 0.000161346727 0.020373772595 0.005338261860</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030791951 -0.000103533 0.000069062 0.000171311 0.000184378 0.000325369 0.000418692 0.000452322 0.000597400 0.000811956 0.000884821 0.000916054 0.001048651 0.001200144 0.001446249 0.001494309 0.001556686 0.001707682 0.001739918 0.001925671 0.001935360 0.002213275 0.002330665 0.002530786 0.002681997 0.002986816 0.003030975 0.003084994 0.003657441 0.003911979 0.004434441 0.004670151 0.004782846 0.005099909 0.005999655 0.006090815 0.006299788 0.006679054 0.006875774 0.007537999 0.007973952 0.008237935 0.008411897 0.009430351 0.009481340 0.010026223 0.010106179 0.011219538 0.011907331 0.012221980 0.013007322 0.013153890 0.014373452 0.014876225 0.015375921 0.015825541 0.015979863 0.016507612 0.016788911 0.017430904 0.018236688 0.018867025 0.018972578 0.019665595 0.020163010 0.020603359 0.021224573 0.021393989 0.021699875 0.023052808 0.023493868 0.026616365 0.026906930 0.028139942 0.028380114 0.029634851 0.030551530 0.031654018 0.033255567 0.033749197 0.034166443 0.035752110 0.036972662 0.037265131 0.038787326 0.039662185 0.040190911 0.041140515 0.042597408 0.044721385 0.045799960 0.047220443 0.048083300 0.049288681 0.050557455 0.051089079 0.051314133 0.051832837 0.052505046 0.052825971 0.052968395 0.053272811 0.054897083 0.055002477 0.056263535 0.056433548 0.056616671 0.057075844 0.057248099 0.059245558 0.060658158 0.061088104 0.061921815 0.062418244 0.063447817 0.064542533 0.065332554 0.066178937 0.066625055 0.068579311 0.069310194 0.070294115 0.072854351 0.074501744 0.074805349 0.076536147 0.079323924 0.084578082 0.087002298 0.087303686 0.087765220 0.089833294 0.090722087 0.091686262 0.094330625 0.095292089 0.095950013 0.096517294 0.097878661 0.098853961 0.100245905 0.100862053 0.102465716 0.103234592 0.103699520 0.104458849 0.104626967 0.105393296 0.106379674 0.107119103 0.108264721 0.110166420 0.111222356 0.112571337 0.113571165 0.115154712 0.116298273 0.116878850 0.118783628 0.121394233 0.122557561 0.123874511 0.125544451 0.126313612 0.126441170 0.126820371 0.127912065 0.132209001 0.135159605 0.135954208 0.143212919 0.144131405 0.147198657 0.147608697 0.149831770 0.151417840 0.154698974 0.154848702 0.156754050 0.161326094 0.162039669 0.173841260 0.174485870 0.182263545 0.185616743 0.186589721 0.189718886 0.190463600 0.194521551 0.195883682 0.199036207 0.200446258 0.205280673 0.207209598 0.207576283 0.210304412 0.216871622 0.217482353 0.218010850 0.220847812 0.220966370 0.225442913 0.226805588 0.232429668 0.235241267 0.235766431 0.236128512 0.244797765 0.256146734 0.257393539 0.264022481 0.269973210 0.280792937 0.283938012 0.286413286 0.291993029 0.297089211 0.304598761 0.306048933 0.307394503 0.314697996 0.316848901 0.317465930 0.322272366 0.330208943 0.333179949 0.351840493 0.353062737 0.355515688 0.356082478 0.360107113 0.363176237 0.364624668 0.384031157 0.386074000 0.392289533 0.410691269 0.426148983 0.431308595 0.462535303 0.469605230 0.479226536 0.484633025 0.484713708 0.487523555 0.491509696 0.509933954 0.515517248 0.535321885 0.569557148 0.575426579 0.591301915 0.594311899 0.607486510 0.608509041 0.645068918 0.648014465 0.649900287 0.674540281 0.678472349 0.688302596 0.693534286 0.694210437 0.700424236 0.705109617 0.718572909 0.742338251 0.751460081 0.759484497 0.772217722 0.774843494 0.779825062 0.811117395 0.816725351 0.820479997 0.823317521 0.823793615 0.832464558 0.835103134 0.838229851 0.842797798 0.845971242 0.847769869 0.850270764 0.859890083 0.865994697 0.869186729 0.874845588 0.886642417 0.889178935 0.889941928 0.900916548 0.901146453 0.904336532 0.924255275 0.928326323 0.936889252 0.938280198 0.966426273 0.977509487 0.987474837 1.001960526 1.020417433 1.028857793 1.042778654 1.052959088 1.059131317 1.069319810 1.087055092 1.089184100 1.105573304 1.112029132 1.113075217 1.129512201 1.136576168 1.141359973 1.145685130 1.176900635 1.179226375 1.181931159 1.187707312 1.191687431 1.198797779 1.225069147 1.229089142 1.275166457 1.303110123 1.321457971 1.328517742 1.333509639 1.336741962 1.337906413 1.342041226 1.344756904 1.345459346 1.359988640 1.379771577 1.383548496 1.386235505 1.406119617 1.421353350 1.430866618 1.551522525 1.687198503 1.776994543</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">328</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34054056" y3="0.04947178" z3="-0.19287403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38679228" y3="0.16568755" z3="0.41606279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64743206" y3="0.4403158" z3="-0.34253346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72864012" y3="1.23549872" z3="-2.26199386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38864487" y3="0.43371616" z3="-1.1847251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72906161" y3="0.84485887" z3="-3.66194873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63372483" y3="1.74757232" z3="-3.13456893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38031686" y3="2.58969567" z3="-4.61389496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56087866" y3="1.24857959" z3="-4.37401426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50089712" y3="2.92486547" z3="-5.17257022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92581259" y3="-0.48541279" z3="-3.44181434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09854458" y3="0.04403842" z3="-1.00204032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40146961" y3="-1.09918569" z3="-2.00201274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92990694" y3="-0.96855615" z3="-1.82906999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10352358" y3="-2.42374799" z3="-1.8478586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14264503" y3="-3.61531305" z3="0.67407486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01458209" y3="-5.25221246" z3="-4.74298782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24304068" y3="-4.99585176" z3="-3.70495312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84102661" y3="-4.30802066" z3="-1.08494275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78129027" y3="-4.58655476" z3="-2.85313204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55864024" y3="-5.08793047" z3="-3.24662944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85846221" y3="-4.73871937" z3="-1.93222782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49435506" y3="-4.25743326" z3="-1.52679042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81400473" y3="-4.50441245" z3="-3.20025353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35751526" y3="-5.40216476" z3="-3.92202769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89487377" y3="-4.7788143" z3="-1.58852334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03097804" y3="-3.85996584" z3="0.23594179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17137815" y3="-3.64798931" z3="0.88088299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05864997" y3="-4.11118786" z3="0.4469652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16667401" y3="-3.5128263" z3="2.34784646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2252943" y3="-3.32860727" z3="5.14570564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36284269" y3="-3.71848533" z3="3.05087626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99964211" y3="-3.22109295" z3="3.06984179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02627749" y3="-3.12953339" z3="4.45842544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39118968" y3="-3.6286526" z3="4.43975796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27782783" y3="-3.95850605" z3="2.5022914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04007273" y3="-3.08680993" z3="2.56550913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09721794" y3="-2.92256922" z3="4.99717481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32925554" y3="-3.80037318" z3="4.97466087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24563134" y3="-3.26515266" z3="6.23723887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41424737" y3="-3.89162882" z3="-0.62303952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17388821" y3="-3.38950577" z3="-1.07630287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52124364" y3="0.24262993" z3="-4.71207605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08106535" y3="-1.72189697" z3="0.02297096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90520774" y3="-0.97104082" z3="1.18438562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84352716" y3="-0.32040676" z3="1.51722933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36945142" y3="0.5543345" z3="1.21940678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44809971" y3="1.45351572" z3="-0.40710144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98372235" y3="-0.70021606" z3="1.39834559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35791438" y3="1.74719039" z3="2.66381851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87967129" y3="-0.96134708" z3="2.08275326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65032087" y3="-0.34772933" z3="3.34131684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20911988" y3="0.7633346" z3="-1.23428033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32569916" y3="2.24392185" z3="-0.40287109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42827454" y3="1.93648763" z3="-0.56745766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0130983" y3="-1.06431329" z3="2.43879388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95634385" y3="-0.23677755" z3="1.15971231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8599162" y3="-1.54253274" z3="0.69872358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41473226" y3="1.20821763" z3="3.6261868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57802114" y3="2.33497301" z3="2.66242508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20017045" y3="2.45998999" z3="2.61314177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78837297" y3="-0.8047237" z3="3.85340716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56510403" y3="-0.52118025" z3="3.92344463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47892651" y3="0.73446228" z3="3.22113216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8409179" y3="-0.70728589" z3="0.9899431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41489271" y3="-2.03433278" z3="0.85128109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76207063" y3="-2.68008938" z3="1.8939601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55245267" y3="-1.98598266" z3="3.0820711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03106805" y3="-0.69386895" z3="3.27731339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68353582" y3="-0.0615286" z3="2.22363575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52084676" y3="-2.53276734" z3="-0.11357385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36572615" y3="-3.68872828" z3="1.7704258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69004689" y3="-2.58503981" z3="4.105661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84799852" y3="-0.18340434" z3="4.22330705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02646465" y3="0.9703677" z3="2.33907799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79582477" y3="0.46273125" z3="-4.28704771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77544568" y3="-0.50525929" z3="-4.46534802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42754419" y3="-1.69683743" z3="-5.09038364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1411414" y3="-1.92730895" z3="-5.56814005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8313929" y3="-0.95626641" z3="-5.36849308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.04061456" y3="1.38594439" z3="-3.7558268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79408722" y3="-0.35952356" z3="-4.10470426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43922174" y3="-2.74607279" z3="-5.23059693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08950252" y3="-2.86756764" z3="-6.06953998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85319037" y3="-1.1418083" z3="-5.70364695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35990149" y3="-1.89060893" z3="5.04708063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31344324" y3="-3.72624639" z3="3.93742084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2159175" y3="-3.64730477" z3="-6.01033495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44120553" y3="-2.66127546" z3="-4.54864776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07198426" y3="1.16224871" z3="-1.49108744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11154211" y3="1.55168412" z3="-2.46965257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44088162" y3="1.49132486" z3="-1.68854704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85123407" y3="2.15693759" z3="-2.81749219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16695827" y3="1.19315138" z3="-0.92588681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90782681" y3="2.39927854" z3="-2.96129363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57216488" y3="2.22160016" z3="-3.63726481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90396476" y3="2.51546376" z3="-3.80637815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85118672" y3="2.49441492" z3="-4.41136165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23569348" y3="3.02468159" z3="-4.71582759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40215634" y3="3.15133588" z3="-3.3313351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28631933" y3="3.5634099" z3="-4.11806874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20954546" y3="4.16257815" z3="-2.73770582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95798363" y3="5.49545674" z3="-2.96089204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03860544" y3="3.87398233" z3="-2.08967224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59484746" y3="6.25110484" z3="-2.49249278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06053644" y3="4.94938765" z3="-4.34296804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88082974" y3="5.89852388" z3="-3.78535233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.20865185" y3="5.24675709" z3="-4.96236344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69596079" y3="6.96178553" z3="-3.96233575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47936639" y3="-2.19972183" z3="-0.2954393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45020267" y3="-2.99218064" z3="-1.06258817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00753273" y3="-2.58190752" z3="0.59293416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09437931" y3="-1.3799446" z3="-0.71287853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17752547" y3="-1.42549675" z3="-1.14741793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31436326" y3="-0.38484638" z3="-1.49495031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1010413" y3="-1.55067108" z3="-0.94259931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41858793" y3="-2.07958461" z3="-1.99894958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3405,.0495,-.1929;7.3868,.1657,.4161;6.6474,.4403,-.3425;4.7286,1.2355,-2.262;4.3886,.4337,-1.1847;2.7291,.8449,-3.6619;3.6337,1.7476,-3.1346;1.3803,2.5897,-4.6139;1.5609,1.2486,-4.374;.5009,2.9249,-5.1726;2.9258,-.4854,-3.4418;3.0985,.044,-1.002;2.4015,-1.0992,-2.002;.9299,-.9686,-1.8291;3.1035,-2.4237,-1.8479;-.1426,-3.6153,.6741;-.0146,-5.2522,-4.743;-.243,-4.9959,-3.705;-.841,-4.308,-1.0849;.7813,-4.5866,-2.8531;-1.5586,-5.0879,-3.2466;-1.8585,-4.7387,-1.9322;.4944,-4.2574,-1.5268;1.814,-4.5044,-3.2003;-2.3575,-5.4022,-3.922;-2.8949,-4.7788,-1.5885;-1.031,-3.86,.2359;-2.1714,-3.648,.8809;-3.0586,-4.1112,.447;-2.1667,-3.5128,2.3478;-2.2253,-3.3286,5.1457;-3.3628,-3.7185,3.0509;-.9996,-3.2211,3.0698;-1.0263,-3.1295,4.4584;-3.3912,-3.6287,4.4398;-4.2778,-3.9585,2.5023;-.0401,-3.0868,2.5655;-.0972,-2.9226,4.9972;-4.3293,-3.8004,4.9747;-2.2456,-3.2652,6.2372;1.4142,-3.8916,-.623;2.1739,-3.3895,-1.0763;.5212,.2426,-4.7121;-3.0811,-1.7219,.023;-2.9052,-.971,1.1844;-1.8435,-.3204,1.5172;-.3695,.5543,1.2194;-.4481,1.4535,-.4071;.9837,-.7002,1.3983;-.3579,1.7472,2.6638;-3.8797,-.9613,2.0828;-3.6503,-.3477,3.3413;-.2091,.7633,-1.2343;.3257,2.2439,-.4029;-1.4283,1.9365,-.5675;1.0131,-1.0643,2.4388;1.9563,-.2368,1.1597;.8599,-1.5425,.6987;-.4147,1.2082,3.6262;.578,2.335,2.6624;-1.2002,2.46,2.6131;-2.7884,-.8047,3.8534;-4.5651,-.5212,3.9234;-3.4789,.7345,3.2211;4.8409,-.7073,.9899;4.4149,-2.0343,.8513;3.7621,-2.6801,1.894;3.5525,-1.986,3.0821;4.0311,-.6939,3.2773;4.6835,-.0615,2.2236;4.5208,-2.5328,-.1136;3.3657,-3.6887,1.7704;2.69,-2.585,4.1057;3.848,-.1834,4.2233;5.0265,.9704,2.3391;-.7958,.4627,-4.287;-1.7754,-.5053,-4.4653;-1.4275,-1.6968,-5.0904;-.1411,-1.9273,-5.5681;.8314,-.9563,-5.3685;-1.0406,1.3859,-3.7558;-2.7941,-.3595,-4.1047;-2.4392,-2.7461,-5.2306;.0895,-2.8676,-6.0695;1.8532,-1.1418,-5.7036;2.3599,-1.8906,5.0471;2.3134,-3.7262,3.9374;-2.2159,-3.6473,-6.0103;-3.4412,-2.6613,-4.5486;7.072,1.1622,-1.4911;6.1115,1.5517,-2.4697;8.4409,1.4913,-1.6885;8.8512,2.1569,-2.8175;9.167,1.1932,-.9259;9.9078,2.3993,-2.9613;6.5722,2.2216,-3.6373;7.904,2.5155,-3.8064;5.8512,2.4944,-4.4114;8.2357,3.0247,-4.7158;3.4022,3.1513,-3.3313;2.2863,3.5634,-4.1181;4.2095,4.1626,-2.7377;3.958,5.4955,-2.9609;5.0386,3.874,-2.0897;4.5948,6.2511,-2.4925;2.0605,4.9494,-4.343;2.8808,5.8985,-3.7854;1.2087,5.2468,-4.9624;2.696,6.9618,-3.9623;-4.4794,-2.1997,-.2954;-4.4502,-2.9922,-1.0626;-5.0075,-2.5819,.5929;-5.0944,-1.3799,-.7129;-2.1775,-1.4255,-1.1474;-2.3144,-.3848,-1.495;-1.101,-1.5507,-.9426;-2.4186,-2.0796,-1.9989;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650429278629</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000503079162 0.000080407406 0.019584200049 0.005309275533</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030793407 -0.000080424 0.000063650 0.000131494 0.000195147 0.000293223 0.000399279 0.000428993 0.000602580 0.000805505 0.000876310 0.000911951 0.001026586 0.001199076 0.001446763 0.001491405 0.001551370 0.001708427 0.001737591 0.001924674 0.001939570 0.002205743 0.002326844 0.002531789 0.002682822 0.002983875 0.003025341 0.003083148 0.003661052 0.003916811 0.004436374 0.004667508 0.004780139 0.005102431 0.005998062 0.006086422 0.006298506 0.006678914 0.006876342 0.007535026 0.007973122 0.008240073 0.008410019 0.009427488 0.009463314 0.010022790 0.010106934 0.011224471 0.011907960 0.012222026 0.013004093 0.013143961 0.014361565 0.014878414 0.015361523 0.015821752 0.015977991 0.016485191 0.016790650 0.017418728 0.018228011 0.018857527 0.018911712 0.019669004 0.020159183 0.020591615 0.021214232 0.021388370 0.021660314 0.023046147 0.023477629 0.026618129 0.026906427 0.028141600 0.028384961 0.029637270 0.030553540 0.031654497 0.033255488 0.033750607 0.034166928 0.035744677 0.036866540 0.037257037 0.038698781 0.039653420 0.040190331 0.041140895 0.042598172 0.044719048 0.045804838 0.047224636 0.048083878 0.049289219 0.050556944 0.051088349 0.051314525 0.051836238 0.052505555 0.052826631 0.052968582 0.053275211 0.054899148 0.055003801 0.056268123 0.056437662 0.056617022 0.057076214 0.057248447 0.059247617 0.060658460 0.061089207 0.061926061 0.062418131 0.063447721 0.064542572 0.065331781 0.066182123 0.066626454 0.068584603 0.069312410 0.070294662 0.072859987 0.074501585 0.074805190 0.076535072 0.079331047 0.084579390 0.087002214 0.087306647 0.087769147 0.089843242 0.090721573 0.091690408 0.094330066 0.095325575 0.095950947 0.096520511 0.097878960 0.098851656 0.100246176 0.100863743 0.102467988 0.103237511 0.103700244 0.104462326 0.104630741 0.105408982 0.106378079 0.107120454 0.108264443 0.110171283 0.111222929 0.112574441 0.113570805 0.115152945 0.116298604 0.116879433 0.118785111 0.121395095 0.122558061 0.123875431 0.125552730 0.126318218 0.126442866 0.126820932 0.127916988 0.132209096 0.135160849 0.135955046 0.143215886 0.144134392 0.147200756 0.147602779 0.149829481 0.151337564 0.154696400 0.154817562 0.156754916 0.161329185 0.162042692 0.173844029 0.174485819 0.182272408 0.185626045 0.186590371 0.189722864 0.190465168 0.194521928 0.195890829 0.199041603 0.200448524 0.205285929 0.207210152 0.207578667 0.210304885 0.216872561 0.217487812 0.218011639 0.220868061 0.220996100 0.225443761 0.226806331 0.232430295 0.235244119 0.235767053 0.236130268 0.244800003 0.256146630 0.257395399 0.264023766 0.269971238 0.280792835 0.283943004 0.286414148 0.291992231 0.297089823 0.304601155 0.306048989 0.307394700 0.314702925 0.316849262 0.317468064 0.322272494 0.330205340 0.333189602 0.351839977 0.353063661 0.355526930 0.356084259 0.360107305 0.363178454 0.364624098 0.384004814 0.386073154 0.392292775 0.410690202 0.426150232 0.431310332 0.462535574 0.469603957 0.479227774 0.484632803 0.484716851 0.487517264 0.491508785 0.509936363 0.515504109 0.535306462 0.569558940 0.575426027 0.591270128 0.594313694 0.607485376 0.608509272 0.645069693 0.648014113 0.649901965 0.674544096 0.678465188 0.688307722 0.693534537 0.694227123 0.700425092 0.705133502 0.718571243 0.742338588 0.751460344 0.759484233 0.772217900 0.774843748 0.779825896 0.811125152 0.816727664 0.820483612 0.823318156 0.823794357 0.832472322 0.835103571 0.838235995 0.842802577 0.845971514 0.847779954 0.850274786 0.859893182 0.865996916 0.869192194 0.874850403 0.886646122 0.889194698 0.889946854 0.900916476 0.901146105 0.904340570 0.924256724 0.928331679 0.936891319 0.938282302 0.966427396 0.977525731 0.987477246 1.001967756 1.020419796 1.028858160 1.042786557 1.052963158 1.059138764 1.069331224 1.087055958 1.089187980 1.105585945 1.112040611 1.113080607 1.129552963 1.136577899 1.141361225 1.145691358 1.176902953 1.179227377 1.181932697 1.187709672 1.191688269 1.198806820 1.225081599 1.229089393 1.275172397 1.303111968 1.321459044 1.328517914 1.333511596 1.336740127 1.337869852 1.342010710 1.344759915 1.345462182 1.359989047 1.379773278 1.383549167 1.386240193 1.405756634 1.421364269 1.430795129 1.551522521 1.687214351 1.777002965</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">329</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34008692" y3="0.0557182" z3="-0.19050115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38627594" y3="0.17099997" z3="0.41809249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64714235" y3="0.44429611" z3="-0.34123183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7293343" y3="1.23731724" z3="-2.26246463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38855977" y3="0.43844415" z3="-1.18323489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73012432" y3="0.84414939" z3="-3.66235842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63511955" y3="1.74773978" z3="-3.13683857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38395371" y3="2.58741096" z3="-4.62082427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56295022" y3="1.24690919" z3="-4.3765661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50521767" y3="2.92175579" z3="-5.18105122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92564462" y3="-0.48570667" z3="-3.43863574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09813076" y3="0.04982723" z3="-0.99988512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40110268" y3="-1.09573217" z3="-1.99725951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92950623" y3="-0.96447881" z3="-1.82498477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10322528" y3="-2.41986716" z3="-1.839782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1449984" y3="-3.61701096" z3="0.67339371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01094865" y3="-5.24404028" z3="-4.74611412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24071419" y3="-4.98909735" z3="-3.70802626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84160774" y3="-4.30557979" z3="-1.08763996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78280891" y3="-4.5817432" z3="-2.8542366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55719032" y3="-5.080803" z3="-3.25162925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85853861" y3="-4.73365196" z3="-1.93707575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49434594" y3="-4.25484532" z3="-1.52769829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81587772" y3="-4.49941764" z3="-3.19990139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35476143" y3="-5.39424461" z3="-3.92839015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89533851" y3="-4.77374775" z3="-1.59480164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03254701" y3="-3.86079944" z3="0.234121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17347238" y3="-3.64929263" z3="0.87869769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06091759" y3="-4.11125721" z3="0.4435181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16890695" y3="-3.51778623" z3="2.34613819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22792672" y3="-3.33905366" z3="5.14442929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36531206" y3="-3.72404562" z3="3.04855933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00189963" y3="-3.22853237" z3="3.06900994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02866804" y3="-3.13958399" z3="4.4577907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39393125" y3="-3.63690305" z3="4.43761309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28016201" y3="-3.96258497" z3="2.49940945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04208765" y3="-3.09413612" z3="2.5653258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09949654" y3="-2.93401999" z3="4.99699377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33238578" y3="-3.80878917" z3="4.97199934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24853275" y3="-3.27747129" z3="6.23608014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41295549" y3="-3.89120829" z3="-0.62192416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17311368" y3="-3.38728875" z3="-1.07257077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52229678" y3="0.24151211" z3="-4.71229266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08203633" y3="-1.72151571" z3="0.02557546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90689649" y3="-0.97280271" z3="1.1886778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84592513" y3="-0.3220964" z3="1.52343923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3694985" y3="0.54915422" z3="1.22604374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44926754" y3="1.45445761" z3="-0.39699125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98090007" y3="-0.70945984" z3="1.39757761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35126378" y3="1.73578767" z3="2.6755777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88179368" y3="-0.9652504" z3="2.08654387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65347786" y3="-0.35364001" z3="3.34626885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21230602" y3="0.76705848" z3="-1.22705691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.3257916" y3="2.24348323" z3="-0.39082886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42880261" y3="1.93976504" z3="-0.55450734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01151927" y3="-1.07585763" z3="2.43688737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95334915" y3="-0.24694129" z3="1.15779955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85343885" y3="-1.54972075" z3="0.69576157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40500304" y3="1.19240278" z3="3.63556347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5858879" y3="2.32190756" z3="2.67332509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1925396" y3="2.45020004" z3="2.63168844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79203022" y3="-0.81134685" z3="3.85828771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56886666" y3="-0.52804652" z3="3.92737802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48191585" y3="0.72882537" z3="3.22798147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84000037" y3="-0.69920611" z3="0.9933796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41992767" y3="-2.02840853" z3="0.85777903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76741692" y3="-2.67380406" z3="1.90089352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55141858" y3="-1.97686354" z3="3.08586486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02388493" y3="-0.68196429" z3="3.27832176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67652688" y3="-0.05019842" z3="2.22446702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52915736" y3="-2.52900033" z3="-0.1060429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37561888" y3="-3.68455032" z3="1.77966293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68853445" y3="-2.57624177" z3="4.10886877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83637072" y3="-0.16935576" z3="4.22254511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01487336" y3="0.98343835" z3="2.33747921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79400211" y3="0.46313571" z3="-4.28600467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77512928" y3="-0.50316069" z3="-4.46311188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42937316" y3="-1.69487943" z3="-5.0901491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14369592" y3="-1.92722352" z3="-5.56904146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83054" y3="-0.95776116" z3="-5.36889718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03711099" y3="1.38660522" z3="-3.75368866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7933602" y3="-0.35613771" z3="-4.10209315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44310984" y3="-2.74243351" z3="-5.23113193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08449905" y3="-2.86749824" z3="-6.07061165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85178742" y3="-1.14462955" z3="-5.70499942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35174145" y3="-1.87956808" z3="5.04664958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3186385" y3="-3.72010085" z3="3.94418227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22185504" y3="-3.64371845" z3="-6.01118999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44482597" y3="-2.6562132" z3="-4.54872437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07246235" y3="1.1635091" z3="-1.49140508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11256737" y3="1.55198156" z3="-2.4707993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44178568" y3="1.49087153" z3="-1.68970607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85283248" y3="2.15365077" z3="-2.82021793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.1675407" y3="1.19344749" z3="-0.92648265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90973782" y3="2.39453563" z3="-2.96472386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57388875" y3="2.21901993" z3="-3.63998425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90584517" y3="2.51091686" z3="-3.80985659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85305472" y3="2.49046792" z3="-4.41473665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23800581" y3="3.01710927" z3="-4.72045318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40512569" y3="3.15101078" z3="-3.33816744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29052941" y3="3.56175488" z3="-4.12730173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21293522" y3="4.16328367" z3="-2.74684966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96306527" y3="5.49560146" z3="-2.97457033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04095788" y3="3.87594699" z3="-2.09695278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59978121" y3="6.25255412" z3="-2.50716624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06643085" y3="4.94725956" z3="-4.35682217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88708634" y3="5.89731518" z3="-3.80126135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21553615" y3="5.24352919" z3="-4.97809059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70372167" y3="6.96006181" z3="-3.98191995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48051845" y3="-2.19772721" z3="-0.29473026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45128462" y3="-2.98795436" z3="-1.06410841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00938457" y3="-2.58222204" z3="0.5920525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09477491" y3="-1.37625569" z3="-0.71004723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17860672" y3="-1.42218269" z3="-1.14419865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31534765" y3="-0.38063247" z3="-1.48929062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10215425" y3="-1.54794996" z3="-0.93985125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41932227" y3="-2.07422313" z3="-1.99705019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3401,.0557,-.1905;7.3863,.171,.4181;6.6471,.4443,-.3412;4.7293,1.2373,-2.2625;4.3886,.4384,-1.1832;2.7301,.8441,-3.6624;3.6351,1.7477,-3.1368;1.384,2.5874,-4.6208;1.563,1.2469,-4.3766;.5052,2.9218,-5.1811;2.9256,-.4857,-3.4386;3.0981,.0498,-.9999;2.4011,-1.0957,-1.9973;.9295,-.9645,-1.825;3.1032,-2.4199,-1.8398;-.145,-3.617,.6734;-.0109,-5.244,-4.7461;-.2407,-4.9891,-3.708;-.8416,-4.3056,-1.0876;.7828,-4.5817,-2.8542;-1.5572,-5.0808,-3.2516;-1.8585,-4.7337,-1.9371;.4943,-4.2548,-1.5277;1.8159,-4.4994,-3.1999;-2.3548,-5.3942,-3.9284;-2.8953,-4.7737,-1.5948;-1.0325,-3.8608,.2341;-2.1735,-3.6493,.8787;-3.0609,-4.1113,.4435;-2.1689,-3.5178,2.3461;-2.2279,-3.3391,5.1444;-3.3653,-3.724,3.0486;-1.0019,-3.2285,3.069;-1.0287,-3.1396,4.4578;-3.3939,-3.6369,4.4376;-4.2802,-3.9626,2.4994;-.0421,-3.0941,2.5653;-.0995,-2.934,4.997;-4.3324,-3.8088,4.972;-2.2485,-3.2775,6.2361;1.413,-3.8912,-.6219;2.1731,-3.3873,-1.0726;.5223,.2415,-4.7123;-3.082,-1.7215,.0256;-2.9069,-.9728,1.1887;-1.8459,-.3221,1.5234;-.3695,.5492,1.226;-.4493,1.4545,-.397;.9809,-.7095,1.3976;-.3513,1.7358,2.6756;-3.8818,-.9653,2.0865;-3.6535,-.3536,3.3463;-.2123,.7671,-1.2271;.3258,2.2435,-.3908;-1.4288,1.9398,-.5545;1.0115,-1.0759,2.4369;1.9533,-.2469,1.1578;.8534,-1.5497,.6958;-.405,1.1924,3.6356;.5859,2.3219,2.6733;-1.1925,2.4502,2.6317;-2.792,-.8113,3.8583;-4.5689,-.528,3.9274;-3.4819,.7288,3.228;4.84,-.6992,.9934;4.4199,-2.0284,.8578;3.7674,-2.6738,1.9009;3.5514,-1.9769,3.0859;4.0239,-.682,3.2783;4.6765,-.0502,2.2245;4.5292,-2.529,-.106;3.3756,-3.6846,1.7797;2.6885,-2.5762,4.1089;3.8364,-.1694,4.2225;5.0149,.9834,2.3375;-.794,.4631,-4.286;-1.7751,-.5032,-4.4631;-1.4294,-1.6949,-5.0901;-.1437,-1.9272,-5.569;.8305,-.9578,-5.3689;-1.0371,1.3866,-3.7537;-2.7934,-.3561,-4.1021;-2.4431,-2.7424,-5.2311;.0845,-2.8675,-6.0706;1.8518,-1.1446,-5.705;2.3517,-1.8796,5.0466;2.3186,-3.7201,3.9442;-2.2219,-3.6437,-6.0112;-3.4448,-2.6562,-4.5487;7.0725,1.1635,-1.4914;6.1126,1.552,-2.4708;8.4418,1.4909,-1.6897;8.8528,2.1537,-2.8202;9.1675,1.1934,-.9265;9.9097,2.3945,-2.9647;6.5739,2.219,-3.64;7.9058,2.5109,-3.8099;5.8531,2.4905,-4.4147;8.238,3.0171,-4.7205;3.4051,3.151,-3.3382;2.2905,3.5618,-4.1273;4.2129,4.1633,-2.7468;3.9631,5.4956,-2.9746;5.041,3.8759,-2.097;4.5998,6.2526,-2.5072;2.0664,4.9473,-4.3568;2.8871,5.8973,-3.8013;1.2155,5.2435,-4.9781;2.7037,6.9601,-3.9819;-4.4805,-2.1977,-.2947;-4.4513,-2.988,-1.0641;-5.0094,-2.5822,.5921;-5.0948,-1.3763,-.71;-2.1786,-1.4222,-1.1442;-2.3153,-.3806,-1.4893;-1.1022,-1.5479,-.9399;-2.4193,-2.0742,-1.9971;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650427354645</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000791848528 0.000128362596 0.017462665727 0.005297243535</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030797523 -0.000019189 0.000134244 0.000176370 0.000186259 0.000301146 0.000361490 0.000418823 0.000595349 0.000806015 0.000874063 0.000909382 0.001023935 0.001199809 0.001445664 0.001495038 0.001559772 0.001709272 0.001739748 0.001924991 0.001947667 0.002208588 0.002327149 0.002533628 0.002681607 0.002982783 0.003025510 0.003082388 0.003660665 0.003921687 0.004436281 0.004669987 0.004780457 0.005103650 0.005998866 0.006081044 0.006298682 0.006678099 0.006875915 0.007535392 0.007974761 0.008241681 0.008409208 0.009426712 0.009462837 0.010019273 0.010107228 0.011223920 0.011907994 0.012222397 0.013004157 0.013141058 0.014358891 0.014880739 0.015359644 0.015818336 0.015982006 0.016480914 0.016790229 0.017414208 0.018224658 0.018852462 0.018905003 0.019670774 0.020157751 0.020589043 0.021211654 0.021388771 0.021648275 0.023042540 0.023475217 0.026620028 0.026906688 0.028144326 0.028389748 0.029637999 0.030556647 0.031655632 0.033255154 0.033751306 0.034167446 0.035745052 0.036856393 0.037256968 0.038674099 0.039652442 0.040191471 0.041141362 0.042598977 0.044719691 0.045809019 0.047225792 0.048084736 0.049289767 0.050556766 0.051088416 0.051314818 0.051837885 0.052506087 0.052827268 0.052969016 0.053275657 0.054900567 0.055004096 0.056275498 0.056445015 0.056618117 0.057076448 0.057248787 0.059249413 0.060658858 0.061089483 0.061929365 0.062419500 0.063447926 0.064542840 0.065332766 0.066192093 0.066626739 0.068592379 0.069318673 0.070294359 0.072866465 0.074504306 0.074805233 0.076535143 0.079338012 0.084580546 0.087002301 0.087306995 0.087773488 0.089847415 0.090721721 0.091705145 0.094331388 0.095332951 0.095955435 0.096521052 0.097879177 0.098851394 0.100246456 0.100864406 0.102471070 0.103238585 0.103701545 0.104466764 0.104637806 0.105431777 0.106378964 0.107121898 0.108265481 0.110171239 0.111222835 0.112582340 0.113572494 0.115156174 0.116298876 0.116879884 0.118786515 0.121395875 0.122559990 0.123876550 0.125562245 0.126322407 0.126447525 0.126823562 0.127928944 0.132209370 0.135160055 0.135957316 0.143215565 0.144133750 0.147201073 0.147603620 0.149833977 0.151330169 0.154699948 0.154822760 0.156757931 0.161330950 0.162045347 0.173844687 0.174486089 0.182289244 0.185646902 0.186594967 0.189725875 0.190466344 0.194524684 0.195897981 0.199044360 0.200453402 0.205288869 0.207211354 0.207589136 0.210306303 0.216874686 0.217501534 0.218013199 0.220883439 0.221031846 0.225444941 0.226807981 0.232431643 0.235245621 0.235769684 0.236131980 0.244803201 0.256146704 0.257397917 0.264026211 0.269971038 0.280792736 0.283957033 0.286416323 0.291992568 0.297091114 0.304606708 0.306049062 0.307394713 0.314718305 0.316849915 0.317468462 0.322272955 0.330206715 0.333196673 0.351841151 0.353064065 0.355556424 0.356085127 0.360107977 0.363181173 0.364623912 0.384005460 0.386074863 0.392297733 0.410694921 0.426152894 0.431310761 0.462536250 0.469619025 0.479228124 0.484632500 0.484717650 0.487521202 0.491509031 0.509945386 0.515508400 0.535307331 0.569570234 0.575429776 0.591275366 0.594318336 0.607498403 0.608512710 0.645070794 0.648016586 0.649907620 0.674548152 0.678472109 0.688310476 0.693538065 0.694233799 0.700425848 0.705145817 0.718572452 0.742344251 0.751460916 0.759484578 0.772219592 0.774843793 0.779829013 0.811130968 0.816732240 0.820485779 0.823319813 0.823794465 0.832476813 0.835107511 0.838258089 0.842804678 0.845971947 0.847794128 0.850276330 0.859898801 0.865998973 0.869195294 0.874852976 0.886657960 0.889254625 0.889957236 0.900916505 0.901147138 0.904343266 0.924263159 0.928338062 0.936898896 0.938287293 0.966428332 0.977552560 0.987477738 1.001982193 1.020421919 1.028859246 1.042795917 1.052973708 1.059170588 1.069337386 1.087056819 1.089196665 1.105598337 1.112045167 1.113093475 1.129627486 1.136583877 1.141363115 1.145717488 1.176907859 1.179228321 1.181933893 1.187721743 1.191689627 1.198818296 1.225096597 1.229091163 1.275194028 1.303124564 1.321460921 1.328522100 1.333528507 1.336741227 1.337874742 1.342020804 1.344780412 1.345494819 1.359993839 1.379776144 1.383554498 1.386280781 1.405842614 1.421385498 1.430862491 1.551522623 1.687238407 1.777035466</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">330</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33873629" y3="0.05874447" z3="-0.191767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38471396" y3="0.17095127" z3="0.41845866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64666283" y3="0.44575954" z3="-0.34132259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73154972" y3="1.24035256" z3="-2.2648134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38850077" y3="0.44287345" z3="-1.18523219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73280093" y3="0.84943721" z3="-3.66586098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63918834" y3="1.75187371" z3="-3.14095957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39078468" y3="2.59371029" z3="-4.62841986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56692604" y3="1.25337213" z3="-4.3814645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51309405" y3="2.9287804" z3="-5.1898775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9255325" y3="-0.48050599" z3="-3.44058588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0973084" y3="0.05656898" z3="-1.00234555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39903545" y3="-1.08864001" z3="-1.99922856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92756656" y3="-0.95566108" z3="-1.82751945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09957789" y3="-2.41360316" z3="-1.84106077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14482751" y3="-3.61806855" z3="0.67696208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01152794" y3="-5.24208706" z3="-4.74374505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2408683" y3="-4.98837138" z3="-3.70523965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84117005" y3="-4.30771622" z3="-1.08401005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78224577" y3="-4.57781857" z3="-2.8525103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55627117" y3="-5.08508315" z3="-3.24735594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85730802" y3="-4.73943429" z3="-1.93229956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49411735" y3="-4.25211048" z3="-1.52554556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81474831" y3="-4.49203489" z3="-3.19936519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35409322" y3="-5.40023753" z3="-3.9235353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89359243" y3="-4.78330279" z3="-1.58877955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03244375" y3="-3.86335862" z3="0.23789334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17349392" y3="-3.65425292" z3="0.88262802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05992549" y3="-4.11786989" z3="0.44742163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16936015" y3="-3.52221436" z3="2.34988475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22875108" y3="-3.34298884" z3="5.14803291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36526622" y3="-3.73120658" z3="3.05234924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00293442" y3="-3.22994689" z3="3.07258149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02994251" y3="-3.1407294" z3="4.46129426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3939363" y3="-3.64396939" z3="4.44139055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27985562" y3="-3.971633" z3="2.50317372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04341407" y3="-3.09346126" z3="2.56875315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10118568" y3="-2.93296355" z3="5.00032959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33177483" y3="-3.81830184" z3="4.9758527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.2494287" y3="-3.28140686" z3="6.23966532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41236411" y3="-3.8850367" z3="-0.62083545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17123182" y3="-3.37994139" z3="-1.07272218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52482693" y3="0.24845313" z3="-4.71549318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08478431" y3="-1.72788712" z3="0.02805618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91119067" y3="-0.97943819" z3="1.19140424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85100715" y3="-0.32777657" z3="1.5270885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37722037" y3="0.54757447" z3="1.22881761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46120991" y3="1.45454196" z3="-0.39308537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97716767" y3="-0.70701121" z3="1.39677856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36051955" y3="1.7324907" z3="2.67966751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88659666" y3="-0.97342106" z3="2.08872812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65975834" y3="-0.36197838" z3="3.34884357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22200108" y3="0.76882316" z3="-1.22387801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31117862" y3="2.24627198" z3="-0.38648159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44252382" y3="1.93640417" z3="-0.54953839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01011502" y3="-1.07589678" z3="2.43542846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94863808" y3="-0.24121122" z3="1.15770178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85250894" y3="-1.54616826" z3="0.6936303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41352592" y3="1.18797227" z3="3.63911648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57547682" y3="2.32016889" z3="2.67802492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20294175" y3="2.44555281" z3="2.63643164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79737902" y3="-0.81819332" z3="3.8608392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57481246" y3="-0.53855969" z3="3.92969838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.49054014" y3="0.72083258" z3="3.23109722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83733088" y3="-0.69668837" z3="0.99123862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41580236" y3="-2.02529845" z3="0.85358231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76332562" y3="-2.67184072" z3="1.89598551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54959084" y3="-1.97695909" z3="3.08295494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02315489" y3="-0.6827795" z3="3.27712324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67520891" y3="-0.04961264" z3="2.22365244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52533554" y3="-2.52475126" z3="-0.1101835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37055335" y3="-3.68195556" z3="1.77312071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68774353" y3="-2.57778185" z3="4.10602908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83649781" y3="-0.17161504" z3="4.22196631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01445707" y3="0.98357602" z3="2.33827019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79040958" y3="0.47093023" z3="-4.28601852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7720672" y3="-0.4957879" z3="-4.46012983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42818461" y3="-1.68844059" z3="-5.08545277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14365714" y3="-1.92140066" z3="-5.56699834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83106802" y3="-0.95164813" z3="-5.37144279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03177603" y3="1.39506215" z3="-3.75488299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78918565" y3="-0.34820642" z3="-4.09595425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44231367" y3="-2.7358937" z3="-5.22167513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08392831" y3="-2.8625109" z3="-6.06844098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85152584" y3="-1.13902614" z3="-5.70979638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35569967" y3="-1.88421307" z3="5.0473812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3134049" y3="-3.71972591" z3="3.93733493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22212148" y3="-3.63995609" z3="-5.99914208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44339161" y3="-2.64672633" z3="-4.5387667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07405671" y3="1.16343308" z3="-1.4914981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11554492" y3="1.55210608" z3="-2.47223324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44406257" y3="1.48821578" z3="-1.68875149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.857347" y3="2.14856489" z3="-2.81970858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16861179" y3="1.19080144" z3="-0.9243314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91474094" y3="2.38734886" z3="-2.96342965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57923121" y3="2.21655098" z3="-3.64183341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91198057" y3="2.50603355" z3="-3.81078854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85985147" y3="2.48863553" z3="-4.41763877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24596804" y3="3.01117242" z3="-4.72177689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41225654" y3="3.15540472" z3="-3.34520136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29930063" y3="3.56699627" z3="-4.13629863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22181565" y3="4.1672275" z3="-2.75550039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9754565" y3="5.49968695" z3="-2.98682807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04854698" y3="3.87945129" z3="-2.10413916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61403682" y3="6.25576567" z3="-2.52143362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07884311" y3="4.95244584" z3="-4.36951716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90144659" y3="5.90187494" z3="-3.8157987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22923537" y3="5.2492802" z3="-4.99229352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72080506" y3="6.9647422" z3="-3.99938261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48217941" y3="-2.2069032" z3="-0.29268622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4512829" y3="-2.99727664" z3="-1.06193136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01041692" y3="-2.59218757" z3="0.59429431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09808698" y3="-1.38692199" z3="-0.70840644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18094426" y3="-1.42730186" z3="-1.14110523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31867135" y3="-0.38593512" z3="-1.48588807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10441752" y3="-1.55207257" z3="-0.93638742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42121172" y3="-2.07923446" z3="-1.9944467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3387,.0587,-.1918;7.3847,.171,.4185;6.6467,.4458,-.3413;4.7315,1.2404,-2.2648;4.3885,.4429,-1.1852;2.7328,.8494,-3.6659;3.6392,1.7519,-3.141;1.3908,2.5937,-4.6284;1.5669,1.2534,-4.3815;.5131,2.9288,-5.1899;2.9255,-.4805,-3.4406;3.0973,.0566,-1.0023;2.399,-1.0886,-1.9992;.9276,-.9557,-1.8275;3.0996,-2.4136,-1.8411;-.1448,-3.6181,.677;-.0115,-5.2421,-4.7437;-.2409,-4.9884,-3.7052;-.8412,-4.3077,-1.084;.7822,-4.5778,-2.8525;-1.5563,-5.0851,-3.2474;-1.8573,-4.7394,-1.9323;.4941,-4.2521,-1.5255;1.8147,-4.492,-3.1994;-2.3541,-5.4002,-3.9235;-2.8936,-4.7833,-1.5888;-1.0324,-3.8634,.2379;-2.1735,-3.6543,.8826;-3.0599,-4.1179,.4474;-2.1694,-3.5222,2.3499;-2.2288,-3.343,5.148;-3.3653,-3.7312,3.0523;-1.0029,-3.2299,3.0726;-1.0299,-3.1407,4.4613;-3.3939,-3.644,4.4414;-4.2799,-3.9716,2.5032;-.0434,-3.0935,2.5688;-.1012,-2.933,5.0003;-4.3318,-3.8183,4.9759;-2.2494,-3.2814,6.2397;1.4124,-3.885,-.6208;2.1712,-3.3799,-1.0727;.5248,.2485,-4.7155;-3.0848,-1.7279,.0281;-2.9112,-.9794,1.1914;-1.851,-.3278,1.5271;-.3772,.5476,1.2288;-.4612,1.4545,-.3931;.9772,-.707,1.3968;-.3605,1.7325,2.6797;-3.8866,-.9734,2.0887;-3.6598,-.362,3.3488;-.222,.7688,-1.2239;.3112,2.2463,-.3865;-1.4425,1.9364,-.5495;1.0101,-1.0759,2.4354;1.9486,-.2412,1.1577;.8525,-1.5462,.6936;-.4135,1.188,3.6391;.5755,2.3202,2.678;-1.2029,2.4456,2.6364;-2.7974,-.8182,3.8608;-4.5748,-.5386,3.9297;-3.4905,.7208,3.2311;4.8373,-.6967,.9912;4.4158,-2.0253,.8536;3.7633,-2.6718,1.896;3.5496,-1.977,3.083;4.0232,-.6828,3.2771;4.6752,-.0496,2.2237;4.5253,-2.5248,-.1102;3.3706,-3.682,1.7731;2.6877,-2.5778,4.106;3.8365,-.1716,4.222;5.0145,.9836,2.3383;-.7904,.4709,-4.286;-1.7721,-.4958,-4.4601;-1.4282,-1.6884,-5.0855;-.1437,-1.9214,-5.567;.8311,-.9516,-5.3714;-1.0318,1.3951,-3.7549;-2.7892,-.3482,-4.096;-2.4423,-2.7359,-5.2217;.0839,-2.8625,-6.0684;1.8515,-1.139,-5.7098;2.3557,-1.8842,5.0474;2.3134,-3.7197,3.9373;-2.2221,-3.64,-5.9991;-3.4434,-2.6467,-4.5388;7.0741,1.1634,-1.4915;6.1155,1.5521,-2.4722;8.4441,1.4882,-1.6888;8.8573,2.1486,-2.8197;9.1686,1.1908,-.9243;9.9147,2.3873,-2.9634;6.5792,2.2166,-3.6418;7.912,2.506,-3.8108;5.8599,2.4886,-4.4176;8.246,3.0112,-4.7218;3.4123,3.1554,-3.3452;2.2993,3.567,-4.1363;4.2218,4.1672,-2.7555;3.9755,5.4997,-2.9868;5.0485,3.8795,-2.1041;4.614,6.2558,-2.5214;2.0788,4.9524,-4.3695;2.9014,5.9019,-3.8158;1.2292,5.2493,-4.9923;2.7208,6.9647,-3.9994;-4.4822,-2.2069,-.2927;-4.4513,-2.9973,-1.0619;-5.0104,-2.5922,.5943;-5.0981,-1.3869,-.7084;-2.1809,-1.4273,-1.1411;-2.3187,-.3859,-1.4859;-1.1044,-1.5521,-.9364;-2.4212,-2.0792,-1.9944;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650427482609</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000629648421 0.000102907367 0.016838090356 0.005314140436</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030799167 -0.000265378 0.000057221 0.000103344 0.000179235 0.000286119 0.000343600 0.000411446 0.000608590 0.000809125 0.000866132 0.000915736 0.001044799 0.001197204 0.001437279 0.001495021 0.001566671 0.001695243 0.001728936 0.001921257 0.001940330 0.002208009 0.002328222 0.002532905 0.002681428 0.002990515 0.003017700 0.003082572 0.003664765 0.003931180 0.004441109 0.004670141 0.004777217 0.005104859 0.005999004 0.006074267 0.006295643 0.006676797 0.006865053 0.007525195 0.007978100 0.008241800 0.008405326 0.009425997 0.009463490 0.010017922 0.010107855 0.011236868 0.011908861 0.012216002 0.013000568 0.013137668 0.014364556 0.014878318 0.015346941 0.015817254 0.015970828 0.016463958 0.016792547 0.017404688 0.018221977 0.018847323 0.018899340 0.019678049 0.020154344 0.020584574 0.021207627 0.021388306 0.021639572 0.023043261 0.023472724 0.026632538 0.026907052 0.028145168 0.028389894 0.029642274 0.030561934 0.031657019 0.033256845 0.033752863 0.034166667 0.035742261 0.036781102 0.037251673 0.038629770 0.039650259 0.040193354 0.041141994 0.042599440 0.044717236 0.045811096 0.047230985 0.048090161 0.049291348 0.050562582 0.051087961 0.051314748 0.051838838 0.052507962 0.052827534 0.052969842 0.053276710 0.054905784 0.055007576 0.056278397 0.056447057 0.056618640 0.057077847 0.057248760 0.059250445 0.060659432 0.061089905 0.061933225 0.062421084 0.063448880 0.064543309 0.065334064 0.066193722 0.066627549 0.068599310 0.069322040 0.070294526 0.072878879 0.074501066 0.074805387 0.076535867 0.079340555 0.084582167 0.087003116 0.087306562 0.087776748 0.089858322 0.090726297 0.091716939 0.094338154 0.095394630 0.095961967 0.096527447 0.097879094 0.098851797 0.100246460 0.100867886 0.102475867 0.103241208 0.103705220 0.104471272 0.104639905 0.105440737 0.106378510 0.107122238 0.108264761 0.110174909 0.111223347 0.112588594 0.113572217 0.115160081 0.116298759 0.116881633 0.118787578 0.121397246 0.122560727 0.123877484 0.125564547 0.126328219 0.126450913 0.126824121 0.127938630 0.132209932 0.135165924 0.135957964 0.143224489 0.144134012 0.147213949 0.147600545 0.149835262 0.151312254 0.154703548 0.154808623 0.156759556 0.161330010 0.162049881 0.173849819 0.174486388 0.182295453 0.185657123 0.186598005 0.189726343 0.190467196 0.194527693 0.195905134 0.199054238 0.200455898 0.205292275 0.207212004 0.207593789 0.210306522 0.216875328 0.217506003 0.218014033 0.220888919 0.221116430 0.225445537 0.226808099 0.232431961 0.235254823 0.235770190 0.236132490 0.244806294 0.256146486 0.257399386 0.264029985 0.269970722 0.280792632 0.283961089 0.286417022 0.291991982 0.297090933 0.304608493 0.306049405 0.307396272 0.314727058 0.316852082 0.317472135 0.322273084 0.330206616 0.333215731 0.351841092 0.353064013 0.355572592 0.356089684 0.360108152 0.363187998 0.364624445 0.383994674 0.386077484 0.392309399 0.410702612 0.426155776 0.431314881 0.462536340 0.469624291 0.479230406 0.484633133 0.484717341 0.487518698 0.491511459 0.509948034 0.515503008 0.535301821 0.569573587 0.575435585 0.591265507 0.594320904 0.607505861 0.608511611 0.645078436 0.648016659 0.649909079 0.674556990 0.678468424 0.688313069 0.693538362 0.694238710 0.700427217 0.705203469 0.718571130 0.742344969 0.751461851 0.759485110 0.772220839 0.774845254 0.779830123 0.811149824 0.816743953 0.820500465 0.823321974 0.823796189 0.832481700 0.835108843 0.838270985 0.842811814 0.845972031 0.847809853 0.850285316 0.859899742 0.866005945 0.869198053 0.874872211 0.886661544 0.889266315 0.889965792 0.900916748 0.901152835 0.904354328 0.924264759 0.928338584 0.936906716 0.938291659 0.966434943 0.977578551 0.987485922 1.001996344 1.020426212 1.028860327 1.042811872 1.052976034 1.059174944 1.069350079 1.087057374 1.089197054 1.105618291 1.112055713 1.113103288 1.129698190 1.136585198 1.141371200 1.145722732 1.176909557 1.179230748 1.181940583 1.187726558 1.191692953 1.198827895 1.225137388 1.229093183 1.275189668 1.303126798 1.321463422 1.328522362 1.333531183 1.336741060 1.337868497 1.342017357 1.344782376 1.345497648 1.359997178 1.379778258 1.383556569 1.386292369 1.405664900 1.421388067 1.430822265 1.551523491 1.687258887 1.777039272</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">331</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33389106" y3="0.05998232" z3="-0.18789636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.37826171" y3="0.17583151" z3="0.42724791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64154257" y3="0.44894167" z3="-0.33452302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.729733" y3="1.24045664" z3="-2.26268411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38525839" y3="0.44274031" z3="-1.18345554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73250202" y3="0.84857858" z3="-3.6662365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63871033" y3="1.75129636" z3="-3.14098063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3931308" y3="2.59228373" z3="-4.63338324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56739678" y3="1.25224014" z3="-4.38341531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51638575" y3="2.92718609" z3="-5.19640495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92495979" y3="-0.48132166" z3="-3.4408601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09402794" y3="0.05529825" z3="-1.00263477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39857748" y3="-1.09113348" z3="-2.00019408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9267207" y3="-0.96132443" z3="-1.82918421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10166169" y3="-2.4147718" z3="-1.84225789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14223336" y3="-3.61514038" z3="0.67424565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01018148" y3="-5.24506905" z3="-4.74472107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23960359" y3="-4.98916682" z3="-3.70681955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83971851" y3="-4.30365067" z3="-1.08682685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78401826" y3="-4.58045467" z3="-2.85391227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55595954" y3="-5.08080484" z3="-3.24982227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85687821" y3="-4.73270358" z3="-1.93549721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49594858" y3="-4.25236824" z3="-1.52755144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81687674" y3="-4.49804679" z3="-3.20001657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35372235" y3="-5.39503932" z3="-3.92594947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89358942" y3="-4.77274908" z3="-1.5927399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03016548" y3="-3.85932781" z3="0.23514761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17096508" y3="-3.65288777" z3="0.88125177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05728064" y3="-4.11654633" z3="0.44559466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.166263" y3="-3.52426244" z3="2.34882272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22458505" y3="-3.35499658" z3="5.14766178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36172586" y3="-3.73696581" z3="3.05107748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00002465" y3="-3.2326226" z3="3.07194473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02644549" y3="-3.14860325" z3="4.46108587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39014523" y3="-3.6543058" z3="4.44039722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27554466" y3="-3.9778594" z3="2.50165262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04108621" y3="-3.09287377" z3="2.56801206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09786467" y3="-2.94158447" z3="5.00066731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32764258" y3="-3.83164583" z3="4.97461299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24484413" y3="-3.29740405" z3="6.23954242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41497123" y3="-3.88755841" z3="-0.6225764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17441958" y3="-3.38273827" z3="-1.07428031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52384839" y3="0.24856617" z3="-4.71485817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08748912" y3="-1.72587312" z3="0.03186273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90954523" y3="-0.9780416" z3="1.19498343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84938858" y3="-0.32371436" z3="1.52548387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37665871" y3="0.55159908" z3="1.22215669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.4608159" y3="1.45271056" z3="-0.40312403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97695221" y3="-0.70339333" z3="1.39496723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35919927" y3="1.74346647" z3="2.66724288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8801804" y3="-0.97503124" z3="2.09762399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64734335" y3="-0.36665105" z3="3.3579705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22460667" y3="0.76399104" z3="-1.23222263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31358653" y3="2.24240406" z3="-0.4002045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44105023" y3="1.93684217" z3="-0.55963957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0083162" y3="-1.06963801" z3="2.43443114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94819693" y3="-0.2387919" z3="1.15507786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8508006" y3="-1.54434838" z3="0.69326804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41240188" y3="1.20414275" z3="3.62947665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57765582" y3="2.33009704" z3="2.66231467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20085214" y3="2.457197" z3="2.62033823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78281679" y3="-0.82435928" z3="3.86471515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55968869" y3="-0.54455798" z3="3.94268137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47799646" y3="0.71651957" z3="3.24217246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83204105" y3="-0.69648941" z3="0.9942369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41255304" y3="-2.0254638" z3="0.85563853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76082139" y3="-2.67389454" z3="1.89732695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54539638" y3="-1.98032726" z3="3.08401455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01741813" y3="-0.68574574" z3="3.27955232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66885511" y3="-0.05065477" z3="2.22693074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52113491" y3="-2.52324534" z3="-0.11013064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36952944" y3="-3.68441862" z3="1.7737328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68522072" y3="-2.58359701" z3="4.10700037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83138267" y3="-0.17634594" z3="4.22610314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00732429" y3="0.9827698" z3="2.34284365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79121615" y3="0.47415076" z3="-4.28719739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77443282" y3="-0.49108167" z3="-4.45861278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43204415" y3="-1.68555345" z3="-5.08222329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14783167" y3="-1.9218728" z3="-5.56331756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82860997" y3="-0.95344844" z3="-5.36828464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03166069" y3="1.3999702" z3="-3.75755723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79175301" y3="-0.34093037" z3="-4.09642173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44813181" y3="-2.73171529" z3="-5.21848588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07753859" y3="-2.86426226" z3="-6.06173498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84879379" y3="-1.14346603" z3="-5.70571248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35434413" y3="-1.89200738" z3="5.05059987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31182352" y3="-3.72551146" z3="3.93696611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23025808" y3="-3.63569411" z3="-5.99641955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44854779" y3="-2.6413455" z3="-4.53473518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07060567" y3="1.16660225" z3="-1.48405121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11402748" y3="1.55336551" z3="-2.46738154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44054518" y3="1.49311656" z3="-1.67797018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85580227" y3="2.15394444" z3="-2.80817641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16335484" y3="1.19709572" z3="-0.91141938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91323065" y3="2.39484321" z3="-2.94913967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57975944" y3="2.21699576" z3="-3.63662704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91246576" y3="2.50874828" z3="-3.80218685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86179758" y3="2.48643444" z3="-4.41478389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24799081" y3="3.01223694" z3="-4.71287846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41353079" y3="3.15449377" z3="-3.34857482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30252462" y3="3.56551191" z3="-4.14273206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22334792" y3="4.16679026" z3="-2.76014131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97980346" y3="5.49887693" z3="-2.99623297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04819699" y3="3.87989567" z3="-2.10605168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61843443" y3="6.25572459" z3="-2.53133882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08481848" y3="4.9506209" z3="-4.38064336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90813142" y3="5.90038905" z3="-3.82856898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2369738" y3="5.24682961" z3="-5.00609211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.73006605" y3="6.9628712" z3="-4.0162207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48570079" y3="-2.20629212" z3="-0.28308015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45697154" y3="-2.99664076" z3="-1.05218814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01006271" y3="-2.59206948" z3="0.60573244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10388817" y3="-1.38679675" z3="-0.69644266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18892104" y3="-1.42409071" z3="-1.1410672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32920733" y3="-0.38264888" z3="-1.48519207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.11154085" y3="-1.5479601" z3="-0.94016582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4312113" y3="-2.07608519" z3="-1.99339553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3339,.06,-.1879;7.3783,.1758,.4272;6.6415,.4489,-.3345;4.7297,1.2405,-2.2627;4.3853,.4427,-1.1835;2.7325,.8486,-3.6662;3.6387,1.7513,-3.141;1.3931,2.5923,-4.6334;1.5674,1.2522,-4.3834;.5164,2.9272,-5.1964;2.925,-.4813,-3.4409;3.094,.0553,-1.0026;2.3986,-1.0911,-2.0002;.9267,-.9613,-1.8292;3.1017,-2.4148,-1.8423;-.1422,-3.6151,.6742;-.0102,-5.2451,-4.7447;-.2396,-4.9892,-3.7068;-.8397,-4.3037,-1.0868;.784,-4.5805,-2.8539;-1.556,-5.0808,-3.2498;-1.8569,-4.7327,-1.9355;.4959,-4.2524,-1.5276;1.8169,-4.498,-3.2;-2.3537,-5.395,-3.9259;-2.8936,-4.7727,-1.5927;-1.0302,-3.8593,.2351;-2.171,-3.6529,.8813;-3.0573,-4.1165,.4456;-2.1663,-3.5243,2.3488;-2.2246,-3.355,5.1477;-3.3617,-3.737,3.0511;-1,-3.2326,3.0719;-1.0264,-3.1486,4.4611;-3.3901,-3.6543,4.4404;-4.2755,-3.9779,2.5017;-.0411,-3.0929,2.568;-.0979,-2.9416,5.0007;-4.3276,-3.8316,4.9746;-2.2448,-3.2974,6.2395;1.415,-3.8876,-.6226;2.1744,-3.3827,-1.0743;.5238,.2486,-4.7149;-3.0875,-1.7259,.0319;-2.9095,-.978,1.195;-1.8494,-.3237,1.5255;-.3767,.5516,1.2222;-.4608,1.4527,-.4031;.977,-.7034,1.395;-.3592,1.7435,2.6672;-3.8802,-.975,2.0976;-3.6473,-.3667,3.358;-.2246,.764,-1.2322;.3136,2.2424,-.4002;-1.4411,1.9368,-.5596;1.0083,-1.0696,2.4344;1.9482,-.2388,1.1551;.8508,-1.5443,.6933;-.4124,1.2041,3.6295;.5777,2.3301,2.6623;-1.2009,2.4572,2.6203;-2.7828,-.8244,3.8647;-4.5597,-.5446,3.9427;-3.478,.7165,3.2422;4.832,-.6965,.9942;4.4126,-2.0255,.8556;3.7608,-2.6739,1.8973;3.5454,-1.9803,3.084;4.0174,-.6857,3.2796;4.6689,-.0507,2.2269;4.5211,-2.5232,-.1101;3.3695,-3.6844,1.7737;2.6852,-2.5836,4.107;3.8314,-.1763,4.2261;5.0073,.9828,2.3428;-.7912,.4742,-4.2872;-1.7744,-.4911,-4.4586;-1.432,-1.6856,-5.0822;-.1478,-1.9219,-5.5633;.8286,-.9534,-5.3683;-1.0317,1.4,-3.7576;-2.7918,-.3409,-4.0964;-2.4481,-2.7317,-5.2185;.0775,-2.8643,-6.0617;1.8488,-1.1435,-5.7057;2.3543,-1.892,5.0506;2.3118,-3.7255,3.937;-2.2303,-3.6357,-5.9964;-3.4485,-2.6413,-4.5347;7.0706,1.1666,-1.4841;6.114,1.5534,-2.4674;8.4405,1.4931,-1.678;8.8558,2.1539,-2.8082;9.1634,1.1971,-.9114;9.9132,2.3948,-2.9491;6.5798,2.217,-3.6366;7.9125,2.5087,-3.8022;5.8618,2.4864,-4.4148;8.248,3.0122,-4.7129;3.4135,3.1545,-3.3486;2.3025,3.5655,-4.1427;4.2233,4.1668,-2.7601;3.9798,5.4989,-2.9962;5.0482,3.8799,-2.1061;4.6184,6.2557,-2.5313;2.0848,4.9506,-4.3806;2.9081,5.9004,-3.8286;1.237,5.2468,-5.0061;2.7301,6.9629,-4.0162;-4.4857,-2.2063,-.2831;-4.457,-2.9966,-1.0522;-5.0101,-2.5921,.6057;-5.1039,-1.3868,-.6964;-2.1889,-1.4241,-1.1411;-2.3292,-.3826,-1.4852;-1.1115,-1.548,-.9402;-2.4312,-2.0761,-1.9934;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650421875820</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001074640771 0.000187186267 0.025566061227 0.005327562902</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030799163 0.000046377 0.000077655 0.000103025 0.000179965 0.000287765 0.000344457 0.000425367 0.000620339 0.000810067 0.000869414 0.000915632 0.001043211 0.001197695 0.001438149 0.001495051 0.001566560 0.001696176 0.001728871 0.001921008 0.001940453 0.002207928 0.002328228 0.002533530 0.002681585 0.002989796 0.003017740 0.003083859 0.003666024 0.003933037 0.004441672 0.004670756 0.004777695 0.005104945 0.005998986 0.006074171 0.006295829 0.006677263 0.006865263 0.007525254 0.007979474 0.008241868 0.008405369 0.009426419 0.009465765 0.010018072 0.010107820 0.011239850 0.011909152 0.012215955 0.013000915 0.013138009 0.014367684 0.014878694 0.015347007 0.015817300 0.015970852 0.016463713 0.016794302 0.017404755 0.018221978 0.018851061 0.018900039 0.019680260 0.020154722 0.020585599 0.021207706 0.021388354 0.021639471 0.023046078 0.023472606 0.026637376 0.026906967 0.028145134 0.028390201 0.029644101 0.030563934 0.031657793 0.033257236 0.033752961 0.034166901 0.035742648 0.036780771 0.037251814 0.038631961 0.039649813 0.040193650 0.041142156 0.042599384 0.044717276 0.045811147 0.047235437 0.048091039 0.049293019 0.050563170 0.051087959 0.051314805 0.051838977 0.052508687 0.052827589 0.052970069 0.053277075 0.054906610 0.055008168 0.056278511 0.056447549 0.056618928 0.057078047 0.057248875 0.059251359 0.060659584 0.061089955 0.061934806 0.062421380 0.063448954 0.064543365 0.065334688 0.066194511 0.066628536 0.068602135 0.069322345 0.070294679 0.072884907 0.074501170 0.074805450 0.076535980 0.079340911 0.084582653 0.087003560 0.087306692 0.087777438 0.089864839 0.090728563 0.091721447 0.094341381 0.095434852 0.095964925 0.096532282 0.097879079 0.098851791 0.100246633 0.100871403 0.102478885 0.103243647 0.103708112 0.104471493 0.104640382 0.105440748 0.106378440 0.107122226 0.108264722 0.110175935 0.111223347 0.112592571 0.113572602 0.115160891 0.116298763 0.116882308 0.118788178 0.121397942 0.122560755 0.123877554 0.125566374 0.126332121 0.126451246 0.126824745 0.127941843 0.132209921 0.135167754 0.135957989 0.143227276 0.144134222 0.147217882 0.147600609 0.149837062 0.151322161 0.154708155 0.154809619 0.156759732 0.161333645 0.162053794 0.173853619 0.174486752 0.182297567 0.185660434 0.186599333 0.189727455 0.190467263 0.194527724 0.195909569 0.199061027 0.200457001 0.205295006 0.207212191 0.207596417 0.210306768 0.216875319 0.217506097 0.218013559 0.220891186 0.221172989 0.225445908 0.226808108 0.232432115 0.235259673 0.235770947 0.236132771 0.244808500 0.256146623 0.257399903 0.264033374 0.269971246 0.280792643 0.283961202 0.286417031 0.291992012 0.297090994 0.304609062 0.306049733 0.307396813 0.314733596 0.316853385 0.317475240 0.322273146 0.330206798 0.333229208 0.351841672 0.353064058 0.355582594 0.356092081 0.360108561 0.363191114 0.364624587 0.383996323 0.386077476 0.392315087 0.410704981 0.426157707 0.431316729 0.462536542 0.469625480 0.479232696 0.484633219 0.484717324 0.487519120 0.491512763 0.509948584 0.515503278 0.535303750 0.569575493 0.575440167 0.591275894 0.594325946 0.607514312 0.608511475 0.645083178 0.648016714 0.649909594 0.674564035 0.678468845 0.688314505 0.693538321 0.694242838 0.700428615 0.705273459 0.718571235 0.742346228 0.751463308 0.759485711 0.772220849 0.774846147 0.779832090 0.811169808 0.816755823 0.820510388 0.823324603 0.823796169 0.832488726 0.835108965 0.838289539 0.842817068 0.845972228 0.847832185 0.850298345 0.859900420 0.866013939 0.869203773 0.874896946 0.886662966 0.889270085 0.889975923 0.900916699 0.901161801 0.904375575 0.924265858 0.928340382 0.936913296 0.938293384 0.966443112 0.977609604 0.987497845 1.002014044 1.020433685 1.028860970 1.042833208 1.052976535 1.059176957 1.069372387 1.087058317 1.089197677 1.105644010 1.112064140 1.113113870 1.129787819 1.136585477 1.141386430 1.145725687 1.176909563 1.179234124 1.181948895 1.187731656 1.191697317 1.198837772 1.225196955 1.229093305 1.275199580 1.303126970 1.321467776 1.328523611 1.333531347 1.336741845 1.337868790 1.342018902 1.344782828 1.345497646 1.359997530 1.379782132 1.383556671 1.386296374 1.405666828 1.421388831 1.430828904 1.551524431 1.687288921 1.777049859</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">332</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33806136" y3="0.05538374" z3="-0.19075058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38344577" y3="0.17135911" z3="0.42095643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64536178" y3="0.44509133" z3="-0.33920538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72991237" y3="1.23780382" z3="-2.26308534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38770743" y3="0.43866975" z3="-1.18443614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73141224" y3="0.84637542" z3="-3.66461415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63699002" y3="1.74907204" z3="-3.13863882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38794202" y3="2.59059665" z3="-4.62517348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56510156" y3="1.25010705" z3="-4.37968577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51002886" y3="2.92556364" z3="-5.18633046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92546664" y3="-0.48364969" z3="-3.44103495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09700326" y3="0.05062855" z3="-1.00224396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39986137" y3="-1.09417268" z3="-2.00035863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92826959" y3="-0.96280695" z3="-1.82827884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10155548" y3="-2.41866129" z3="-1.84363241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1438134" y3="-3.61618599" z3="0.67445277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01347745" y3="-5.24562747" z3="-4.74450509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24245511" y3="-4.99048822" z3="-3.70630445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84165343" y3="-4.30615238" z3="-1.0857523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78136096" y3="-4.58156551" z3="-2.85374717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55826088" y3="-5.08353583" z3="-3.24856498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8587182" y3="-4.73603685" z3="-1.93389583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49380627" y3="-4.25417858" z3="-1.52712208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81407727" y3="-4.4984508" z3="-3.20044267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3565598" y3="-5.39758304" z3="-3.92452516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89520243" y3="-4.77696488" z3="-1.59057587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03193206" y3="-3.86061081" z3="0.23586737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17247922" y3="-3.65096729" z3="0.88139474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05939244" y3="-4.11437334" z3="0.44686931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16731868" y3="-3.51901235" z3="2.34870511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22478009" y3="-3.34134442" z3="5.14704082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36285611" y3="-3.72790383" z3="3.05185233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00035542" y3="-3.22734528" z3="3.07080359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02639885" y3="-3.13901271" z3="4.45962623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39066632" y3="-3.64129462" z3="4.44096174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27766371" y3="-3.96814115" z3="2.50321254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04121263" y3="-3.09063271" z3="2.56633201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09735637" y3="-2.9318601" z3="4.99835756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32825735" y3="-3.81553877" z3="4.97593739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24466904" y3="-3.28042813" z3="6.23873721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41300436" y3="-3.88894733" z3="-0.62253429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17252623" y3="-3.38518325" z3="-1.07463165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52349348" y3="0.2452279" z3="-4.71467356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08433651" y3="-1.72453247" z3="0.02754629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90832998" y3="-0.97554054" z3="1.19023257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84733568" y3="-0.32385247" z3="1.52326117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37368522" y3="0.55130453" z3="1.22375295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45565926" y3="1.45355847" z3="-0.4009293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9798831" y3="-0.70359607" z3="1.39721293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35900247" y3="1.7412924" z3="2.6704939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88187171" y3="-0.96894273" z3="2.089622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65207815" y3="-0.35776014" z3="3.34929508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21636493" y3="0.76539483" z3="-1.22968764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31695152" y3="2.24503023" z3="-0.39586099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43665505" y3="1.93548884" z3="-0.55950539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01115455" y3="-1.06961557" z3="2.43681702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95176681" y3="-0.23933078" z3="1.15768267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8547867" y3="-1.54458577" z3="0.69604449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41239515" y3="1.20031665" z3="3.63189882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57652861" y3="2.32984199" z3="2.66748933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20203137" y3="2.45347963" z3="2.623824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78924261" y3="-0.81490872" z3="3.85963612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56621687" y3="-0.53348072" z3="3.93183331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4818901" y3="0.72490085" z3="3.23129015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83728921" y3="-0.70073187" z3="0.99201779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41454034" y3="-2.02884887" z3="0.8539126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76239592" y3="-2.67551342" z3="1.89644452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.549914" y3="-1.98111221" z3="3.08372622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02491245" y3="-0.68755075" z3="3.27841252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67687267" y3="-0.05435254" z3="2.2249452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52222174" y3="-2.52757562" z3="-0.11078539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36871453" y3="-3.68524929" z3="1.77334512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68842903" y3="-2.58180523" z3="4.10712669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.8398669" y3="-0.1769666" z3="4.2240862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01731167" y3="0.97840715" z3="2.34001822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79220049" y3="0.46739479" z3="-4.28667974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77369072" y3="-0.49911542" z3="-4.46215285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42902696" y3="-1.69134398" z3="-5.08812714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14403425" y3="-1.92403824" z3="-5.56856452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83051709" y3="-0.95444596" z3="-5.37107094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03433984" y3="1.3912212" z3="-3.75503016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79131905" y3="-0.35172119" z3="-4.09948508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4430122" y3="-2.73884669" z3="-5.226527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08378374" y3="-2.86474214" z3="-6.07004947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85127565" y3="-1.14159536" z3="-5.70852217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35559851" y3="-1.88750649" z3="5.0478355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31536642" y3="-3.72429212" z3="3.93959717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22239291" y3="-3.64153578" z3="-6.00535989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44430092" y3="-2.65113684" z3="-4.54377406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.072106" y3="1.16455279" z3="-1.48852353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11348846" y3="1.55223087" z3="-2.46953252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44151962" y3="1.49251267" z3="-1.68443744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85414978" y3="2.15521764" z3="-2.81431664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16609941" y3="1.19584859" z3="-0.91977729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9111153" y3="2.39686269" z3="-2.95687621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57652726" y3="2.21867776" z3="-3.63821856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90873417" y3="2.51144009" z3="-3.80581533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85700541" y3="2.48965459" z3="-4.41432189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24224212" y3="3.01780337" z3="-4.71606329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40873857" y3="3.15258715" z3="-3.34108963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29557272" y3="3.56410106" z3="-4.13188999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2171063" y3="4.16442649" z3="-2.7497819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96953905" y3="5.49690365" z3="-2.9794572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04383088" y3="3.87668175" z3="-2.09842544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60707936" y3="6.25311001" z3="-2.51260551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07391404" y3="4.94961988" z3="-4.36348218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.8954506" y3="5.89911888" z3="-3.80830565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22425495" y3="5.24638301" z3="-4.986202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71394812" y3="6.96199419" z3="-3.99065464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48247371" y3="-2.20304458" z3="-0.29059594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45313578" y3="-2.9941894" z3="-1.05904703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00970525" y3="-2.58718998" z3="0.59745622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0983535" y3="-1.38301707" z3="-0.70622363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18225179" y3="-1.42503954" z3="-1.1432833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32012772" y3="-0.38376092" z3="-1.48850682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10551773" y3="-1.55004834" z3="-0.93987497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42377141" y3="-2.07745252" z3="-1.99583887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3381,.0554,-.1908;7.3834,.1714,.421;6.6454,.4451,-.3392;4.7299,1.2378,-2.2631;4.3877,.4387,-1.1844;2.7314,.8464,-3.6646;3.637,1.7491,-3.1386;1.3879,2.5906,-4.6252;1.5651,1.2501,-4.3797;.51,2.9256,-5.1863;2.9255,-.4836,-3.441;3.097,.0506,-1.0022;2.3999,-1.0942,-2.0004;.9283,-.9628,-1.8283;3.1016,-2.4187,-1.8436;-.1438,-3.6162,.6745;-.0135,-5.2456,-4.7445;-.2425,-4.9905,-3.7063;-.8417,-4.3062,-1.0858;.7814,-4.5816,-2.8537;-1.5583,-5.0835,-3.2486;-1.8587,-4.736,-1.9339;.4938,-4.2542,-1.5271;1.8141,-4.4985,-3.2004;-2.3566,-5.3976,-3.9245;-2.8952,-4.777,-1.5906;-1.0319,-3.8606,.2359;-2.1725,-3.651,.8814;-3.0594,-4.1144,.4469;-2.1673,-3.519,2.3487;-2.2248,-3.3413,5.147;-3.3629,-3.7279,3.0519;-1.0004,-3.2273,3.0708;-1.0264,-3.139,4.4596;-3.3907,-3.6413,4.441;-4.2777,-3.9681,2.5032;-.0412,-3.0906,2.5663;-.0974,-2.9319,4.9984;-4.3283,-3.8155,4.9759;-2.2447,-3.2804,6.2387;1.413,-3.8889,-.6225;2.1725,-3.3852,-1.0746;.5235,.2452,-4.7147;-3.0843,-1.7245,.0275;-2.9083,-.9755,1.1902;-1.8473,-.3239,1.5233;-.3737,.5513,1.2238;-.4557,1.4536,-.4009;.9799,-.7036,1.3972;-.359,1.7413,2.6705;-3.8819,-.9689,2.0896;-3.6521,-.3578,3.3493;-.2164,.7654,-1.2297;.317,2.245,-.3959;-1.4367,1.9355,-.5595;1.0112,-1.0696,2.4368;1.9518,-.2393,1.1577;.8548,-1.5446,.696;-.4124,1.2003,3.6319;.5765,2.3298,2.6675;-1.202,2.4535,2.6238;-2.7892,-.8149,3.8596;-4.5662,-.5335,3.9318;-3.4819,.7249,3.2313;4.8373,-.7007,.992;4.4145,-2.0288,.8539;3.7624,-2.6755,1.8964;3.5499,-1.9811,3.0837;4.0249,-.6876,3.2784;4.6769,-.0544,2.2249;4.5222,-2.5276,-.1108;3.3687,-3.6852,1.7733;2.6884,-2.5818,4.1071;3.8399,-.177,4.2241;5.0173,.9784,2.34;-.7922,.4674,-4.2867;-1.7737,-.4991,-4.4622;-1.429,-1.6913,-5.0881;-.144,-1.924,-5.5686;.8305,-.9544,-5.3711;-1.0343,1.3912,-3.755;-2.7913,-.3517,-4.0995;-2.443,-2.7388,-5.2265;.0838,-2.8647,-6.07;1.8513,-1.1416,-5.7085;2.3556,-1.8875,5.0478;2.3154,-3.7243,3.9396;-2.2224,-3.6415,-6.0054;-3.4443,-2.6511,-4.5438;7.0721,1.1646,-1.4885;6.1135,1.5522,-2.4695;8.4415,1.4925,-1.6844;8.8541,2.1552,-2.8143;9.1661,1.1958,-.9198;9.9111,2.3969,-2.9569;6.5765,2.2187,-3.6382;7.9087,2.5114,-3.8058;5.857,2.4897,-4.4143;8.2422,3.0178,-4.7161;3.4087,3.1526,-3.3411;2.2956,3.5641,-4.1319;4.2171,4.1644,-2.7498;3.9695,5.4969,-2.9795;5.0438,3.8767,-2.0984;4.6071,6.2531,-2.5126;2.0739,4.9496,-4.3635;2.8955,5.8991,-3.8083;1.2243,5.2464,-4.9862;2.7139,6.962,-3.9907;-4.4825,-2.203,-.2906;-4.4531,-2.9942,-1.059;-5.0097,-2.5872,.5975;-5.0984,-1.383,-.7062;-2.1823,-1.425,-1.1433;-2.3201,-.3838,-1.4885;-1.1055,-1.55,-.9399;-2.4238,-2.0775,-1.9958;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650429516785</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000174729874 0.000020898101 0.027323993792 0.005298858054</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002575403913 0.001716935942</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030800759 -0.000003287 0.000057117 0.000137580 0.000188503 0.000291544 0.000323724 0.000412321 0.000606805 0.000809002 0.000869913 0.000911145 0.001036338 0.001200103 0.001438473 0.001495522 0.001571267 0.001702186 0.001726831 0.001919499 0.001940499 0.002208477 0.002327082 0.002534822 0.002681702 0.002985731 0.003016056 0.003078870 0.003666154 0.003934012 0.004439218 0.004668658 0.004778316 0.005104989 0.005983456 0.006064759 0.006292602 0.006677137 0.006854215 0.007512180 0.007971745 0.008242763 0.008404079 0.009425262 0.009452467 0.010004235 0.010107094 0.011241938 0.011902875 0.012207214 0.012992602 0.013123941 0.014353660 0.014879246 0.015329290 0.015808221 0.015964891 0.016427533 0.016794945 0.017395860 0.018203194 0.018816168 0.018896983 0.019681879 0.020151118 0.020578062 0.021194054 0.021388177 0.021616103 0.023042152 0.023460753 0.026639173 0.026906524 0.028145683 0.028390209 0.029645587 0.030565754 0.031656645 0.033255263 0.033753255 0.034166783 0.035739474 0.036694899 0.037248415 0.038574059 0.039642582 0.040194810 0.041141917 0.042599579 0.044716526 0.045812617 0.047237793 0.048092093 0.049293584 0.050563945 0.051088025 0.051314824 0.051841773 0.052509137 0.052827980 0.052970351 0.053277981 0.054909213 0.055008974 0.056280490 0.056450291 0.056619022 0.057078361 0.057248833 0.059251784 0.060659759 0.061089865 0.061935503 0.062421425 0.063449068 0.064542828 0.065333203 0.066197832 0.066629109 0.068604412 0.069326491 0.070293917 0.072888513 0.074501312 0.074805436 0.076535464 0.079342235 0.084583442 0.087004331 0.087308398 0.087778501 0.089867837 0.090727391 0.091724763 0.094341535 0.095456357 0.095968229 0.096534660 0.097879345 0.098851216 0.100246788 0.100873096 0.102481263 0.103244753 0.103710356 0.104475061 0.104647745 0.105463160 0.106378277 0.107124100 0.108265070 0.110180160 0.111223720 0.112595773 0.113572930 0.115159908 0.116298929 0.116883356 0.118788316 0.121398549 0.122563297 0.123878956 0.125567405 0.126334063 0.126454491 0.126826281 0.127948534 0.132210013 0.135169273 0.135959126 0.143225755 0.144134222 0.147220839 0.147599650 0.149836558 0.151267582 0.154699531 0.154794420 0.156761322 0.161331620 0.162055001 0.173855900 0.174487155 0.182303882 0.185675386 0.186603351 0.189727442 0.190468702 0.194528228 0.195914743 0.199066163 0.200457778 0.205298908 0.207213207 0.207598831 0.210307064 0.216877433 0.217513429 0.218015194 0.220892186 0.221199096 0.225446813 0.226808725 0.232433388 0.235262382 0.235772994 0.236132686 0.244809458 0.256146671 0.257400479 0.264034107 0.269969270 0.280792332 0.283970973 0.286418192 0.291991411 0.297091057 0.304611874 0.306049705 0.307397794 0.314735403 0.316853057 0.317476094 0.322273363 0.330202191 0.333235097 0.351840951 0.353064052 0.355594888 0.356094091 0.360108941 0.363193119 0.364624647 0.383978946 0.386075177 0.392315715 0.410704343 0.426159801 0.431317399 0.462536594 0.469618355 0.479233393 0.484633275 0.484717414 0.487515587 0.491512994 0.509950474 0.515485999 0.535284052 0.569578207 0.575440462 0.591242798 0.594327310 0.607518330 0.608512611 0.645087067 0.648018095 0.649911891 0.674565632 0.678459808 0.688315817 0.693536121 0.694251139 0.700429347 0.705291374 0.718571494 0.742345514 0.751463658 0.759485863 0.772222073 0.774846710 0.779833025 0.811173939 0.816759779 0.820518165 0.823325344 0.823796668 0.832491176 0.835110111 0.838296805 0.842818936 0.845972219 0.847835422 0.850300207 0.859901204 0.866015983 0.869206009 0.874900390 0.886666233 0.889295440 0.889982334 0.900916774 0.901161638 0.904383616 0.924269535 0.928341228 0.936916455 0.938297616 0.966445633 0.977644697 0.987499887 1.002019261 1.020435647 1.028861135 1.042838470 1.052983652 1.059191437 1.069385780 1.087058510 1.089198788 1.105651156 1.112074672 1.113119744 1.129813835 1.136589043 1.141389497 1.145736748 1.176912069 1.179235480 1.181951306 1.187737820 1.191698616 1.198841109 1.225209526 1.229093927 1.275152521 1.303127109 1.321469196 1.328524163 1.333528261 1.336743309 1.337820844 1.341984993 1.344788463 1.345512651 1.360000116 1.379782831 1.383557710 1.386306068 1.405288312 1.421391093 1.430746101 1.551524442 1.687295867 1.777059725</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">333</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3418993" y3="0.05001509" z3="-0.19355406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38869027" y3="0.16457179" z3="0.41420665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64909577" y3="0.43953301" z3="-0.34410111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73005733" y3="1.23595425" z3="-2.26280815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38986593" y3="0.43471365" z3="-1.18510228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72981235" y3="0.84627692" z3="-3.66208376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63523605" y3="1.74857674" z3="-3.13517687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.3820403" y3="2.59172473" z3="-4.61430216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56185398" y3="1.25047231" z3="-4.37428286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50265388" y3="2.92737377" z3="-5.17274396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92550256" y3="-0.48403915" z3="-3.44141064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09953626" y3="0.04595834" z3="-1.00174595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40145709" y3="-1.09714222" z3="-2.00115447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93006387" y3="-0.96579646" z3="-1.82732778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10307398" y3="-2.42201119" z3="-1.84737905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14229514" y3="-3.61624475" z3="0.67481985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01335953" y3="-5.25139018" z3="-4.74298922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24195207" y3="-4.99552096" z3="-3.70485111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84018821" y3="-4.30897273" z3="-1.0845307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78214205" y3="-4.5855955" z3="-2.85304457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55759714" y3="-5.08860932" z3="-3.24640857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85753611" y3="-4.74010334" z3="-1.93185957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49504662" y3="-4.25703945" z3="-1.52655044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81462201" y3="-4.50226516" z3="-3.20026519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35587822" y3="-5.40380242" z3="-3.92171968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8938238" y3="-4.7812031" z3="-1.58795945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03034679" y3="-3.86151723" z3="0.23652373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17111578" y3="-3.64995097" z3="0.88119739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05815098" y3="-4.11399028" z3="0.44739241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16661111" y3="-3.51451765" z3="2.34815402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22558647" y3="-3.32959377" z3="5.14593473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36262908" y3="-3.72148386" z3="3.05114135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00010099" y3="-3.22083801" z3="3.07006659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02685296" y3="-3.12904274" z3="4.45866083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39127729" y3="-3.63115299" z3="4.4399701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27691851" y3="-3.96334984" z3="2.50262077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04077585" y3="-3.08516616" z3="2.56572589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.0981156" y3="-2.92067862" z3="4.99740671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32920959" y3="-3.80388335" z3="4.97486796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24610404" y3="-3.26578535" z3="6.23744846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41467047" y3="-3.89054921" z3="-0.62280548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17423079" y3="-3.38803671" z3="-1.07612231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52162787" y3="0.2450982" z3="-4.71137041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08152727" y3="-1.7250637" z3="0.02276828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9069842" y3="-0.97427368" z3="1.18448988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84567047" y3="-0.32363033" z3="1.51834911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37344902" y3="0.55454989" z3="1.22132025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45337871" y3="1.45358209" z3="-0.40526067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9825727" y3="-0.69721168" z3="1.40018888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36557888" y3="1.7470897" z3="2.66602509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8822123" y3="-0.96506165" z3="2.08205047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65468538" y3="-0.35067065" z3="3.34050121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21230045" y3="0.76388696" z3="-1.23230519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31861903" y3="2.24573822" z3="-0.40059347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43454944" y3="1.93444476" z3="-0.56628328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01359063" y3="-1.06002091" z3="2.44088781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95386917" y3="-0.23238941" z3="1.15970868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85889073" y3="-1.5407561" z3="0.70149698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42140703" y3="1.20761177" z3="3.62813988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56899835" y3="2.3371884" z3="2.66531427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20966608" y3="2.45771919" z3="2.61523455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79320628" y3="-0.80685197" z3="3.85387647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57011471" y3="-0.52427924" z3="3.92161038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48362344" y3="0.7315966" z3="3.21991296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84209771" y3="-0.70609793" z3="0.98962464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41515203" y3="-2.03278111" z3="0.85118857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76189017" y3="-2.67804888" z3="1.89387498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55265483" y3="-1.98377803" z3="3.08156955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03254289" y3="-0.69208452" z3="3.27688341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68538918" y3="-0.06016926" z3="2.22319628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51934781" y3="-2.53085275" z3="-0.11467158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36455617" y3="-3.68629672" z3="1.77032648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69015454" y3="-2.58231726" z3="4.10538623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.850875" y3="-0.18181346" z3="4.22361734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02947257" y3="0.97140276" z3="2.33878186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79505415" y3="0.46536224" z3="-4.28557706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77497712" y3="-0.50238199" z3="-4.46246936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42767263" y3="-1.6941703" z3="-5.08803746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14178963" y3="-1.92488025" z3="-5.56738299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83109583" y3="-0.95385023" z3="-5.36825598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03938401" y3="1.38860892" z3="-3.75364912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79338758" y3="-0.35644311" z3="-4.10147346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43978872" y3="-2.74357153" z3="-5.22726916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08791828" y3="-2.86516868" z3="-6.06844105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85249736" y3="-1.13956998" z3="-5.70451576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36285753" y3="-1.8884902" z3="5.04852548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31109886" y3="-3.7225482" z3="3.93613823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21646218" y3="-3.64675979" z3="-6.0046672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44237628" y3="-2.65669743" z3="-4.54626008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07374083" y3="1.16045395" z3="-1.49328235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11317935" y3="1.55070189" z3="-2.4713971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44286381" y3="1.48753684" z3="-1.69192033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85332462" y3="2.15232463" z3="-2.82148209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16901973" y3="1.18858423" z3="-0.92968592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91016736" y3="2.39332991" z3="-2.96617794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57376821" y3="2.21940544" z3="-3.63971731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90583114" y3="2.51158363" z3="-3.80989761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85247007" y3="2.49231007" z3="-4.41355551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23756113" y3="3.01918907" z3="-4.71995349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40471054" y3="3.15235035" z3="-3.33249285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28881163" y3="3.5649709" z3="-4.11888069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.2131297" y3="4.16309399" z3="-2.73953767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9621866" y3="5.4961042" z3="-2.96265935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.0423541" y3="3.87405221" z3="-2.09189071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59950411" y3="6.25164404" z3="-2.49430929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06368555" y3="4.95113879" z3="-4.34368407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88473348" y3="5.89982872" z3="-3.78644445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21172612" y3="5.24898176" z3="-4.96274691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70037474" y3="6.96316635" z3="-3.96333065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47935597" y3="-2.20349049" z3="-0.29696496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44894719" y3="-2.99480364" z3="-1.0650489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00765159" y3="-2.58725596" z3="0.59047251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09486627" y3="-1.38365779" z3="-0.71373139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17723084" y3="-1.42757564" z3="-1.14676115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31390324" y3="-0.38653488" z3="-1.49351039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10095595" y3="-1.55258327" z3="-0.94099587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41721733" y3="-2.08097948" z3="-1.99881576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3419,.05,-.1936;7.3887,.1646,.4142;6.6491,.4395,-.3441;4.7301,1.236,-2.2628;4.3899,.4347,-1.1851;2.7298,.8463,-3.6621;3.6352,1.7486,-3.1352;1.382,2.5917,-4.6143;1.5619,1.2505,-4.3743;.5027,2.9274,-5.1727;2.9255,-.484,-3.4414;3.0995,.046,-1.0017;2.4015,-1.0971,-2.0012;.9301,-.9658,-1.8273;3.1031,-2.422,-1.8474;-.1423,-3.6162,.6748;-.0134,-5.2514,-4.743;-.242,-4.9955,-3.7049;-.8402,-4.309,-1.0845;.7821,-4.5856,-2.853;-1.5576,-5.0886,-3.2464;-1.8575,-4.7401,-1.9319;.495,-4.257,-1.5266;1.8146,-4.5023,-3.2003;-2.3559,-5.4038,-3.9217;-2.8938,-4.7812,-1.588;-1.0303,-3.8615,.2365;-2.1711,-3.65,.8812;-3.0582,-4.114,.4474;-2.1666,-3.5145,2.3482;-2.2256,-3.3296,5.1459;-3.3626,-3.7215,3.0511;-1.0001,-3.2208,3.0701;-1.0269,-3.129,4.4587;-3.3913,-3.6312,4.44;-4.2769,-3.9633,2.5026;-.0408,-3.0852,2.5657;-.0981,-2.9207,4.9974;-4.3292,-3.8039,4.9749;-2.2461,-3.2658,6.2374;1.4147,-3.8905,-.6228;2.1742,-3.388,-1.0761;.5216,.2451,-4.7114;-3.0815,-1.7251,.0228;-2.907,-.9743,1.1845;-1.8457,-.3236,1.5183;-.3734,.5545,1.2213;-.4534,1.4536,-.4053;.9826,-.6972,1.4002;-.3656,1.7471,2.666;-3.8822,-.9651,2.0821;-3.6547,-.3507,3.3405;-.2123,.7639,-1.2323;.3186,2.2457,-.4006;-1.4345,1.9344,-.5663;1.0136,-1.06,2.4409;1.9539,-.2324,1.1597;.8589,-1.5408,.7015;-.4214,1.2076,3.6281;.569,2.3372,2.6653;-1.2097,2.4577,2.6152;-2.7932,-.8069,3.8539;-4.5701,-.5243,3.9216;-3.4836,.7316,3.2199;4.8421,-.7061,.9896;4.4152,-2.0328,.8512;3.7619,-2.678,1.8939;3.5527,-1.9838,3.0816;4.0325,-.6921,3.2769;4.6854,-.0602,2.2232;4.5193,-2.5309,-.1147;3.3646,-3.6863,1.7703;2.6902,-2.5823,4.1054;3.8509,-.1818,4.2236;5.0295,.9714,2.3388;-.7951,.4654,-4.2856;-1.775,-.5024,-4.4625;-1.4277,-1.6942,-5.088;-.1418,-1.9249,-5.5674;.8311,-.9539,-5.3683;-1.0394,1.3886,-3.7536;-2.7934,-.3564,-4.1015;-2.4398,-2.7436,-5.2273;.0879,-2.8652,-6.0684;1.8525,-1.1396,-5.7045;2.3629,-1.8885,5.0485;2.3111,-3.7225,3.9361;-2.2165,-3.6468,-6.0047;-3.4424,-2.6567,-4.5463;7.0737,1.1605,-1.4933;6.1132,1.5507,-2.4714;8.4429,1.4875,-1.6919;8.8533,2.1523,-2.8215;9.169,1.1886,-.9297;9.9102,2.3933,-2.9662;6.5738,2.2194,-3.6397;7.9058,2.5116,-3.8099;5.8525,2.4923,-4.4136;8.2376,3.0192,-4.72;3.4047,3.1524,-3.3325;2.2888,3.565,-4.1189;4.2131,4.1631,-2.7395;3.9622,5.4961,-2.9627;5.0424,3.8741,-2.0919;4.5995,6.2516,-2.4943;2.0637,4.9511,-4.3437;2.8847,5.8998,-3.7864;1.2117,5.249,-4.9627;2.7004,6.9632,-3.9633;-4.4794,-2.2035,-.297;-4.4489,-2.9948,-1.065;-5.0077,-2.5873,.5905;-5.0949,-1.3837,-.7137;-2.1772,-1.4276,-1.1468;-2.3139,-.3865,-1.4935;-1.101,-1.5526,-.941;-2.4172,-2.081,-1.9988;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650428532679</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000460305889 0.000089613372 0.027793549555 0.005271749630</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030802775 -0.000191340 0.000068050 0.000183061 0.000195317 0.000290583 0.000334232 0.000422052 0.000635775 0.000811403 0.000872294 0.000913212 0.001057172 0.001201712 0.001446226 0.001482586 0.001569697 0.001685665 0.001725645 0.001923651 0.001941847 0.002209456 0.002318164 0.002533894 0.002681465 0.002978530 0.003015386 0.003080490 0.003672028 0.003931877 0.004440192 0.004668594 0.004777872 0.005104923 0.005981767 0.006063809 0.006290958 0.006677821 0.006849797 0.007505451 0.007968884 0.008242314 0.008405052 0.009424659 0.009451668 0.010005102 0.010104908 0.011247644 0.011903967 0.012202706 0.012992624 0.013120886 0.014351136 0.014879013 0.015321546 0.015807174 0.015957858 0.016414708 0.016798848 0.017381710 0.018198834 0.018768774 0.018898889 0.019684621 0.020145447 0.020573521 0.021191065 0.021387881 0.021598832 0.023036952 0.023457459 0.026645178 0.026906744 0.028146093 0.028389860 0.029648022 0.030568926 0.031657794 0.033255507 0.033753178 0.034168765 0.035733709 0.036639279 0.037248146 0.038551440 0.039635075 0.040197423 0.041142027 0.042599958 0.044716064 0.045813294 0.047242856 0.048094429 0.049295225 0.050566233 0.051088031 0.051315141 0.051842738 0.052510029 0.052829412 0.052970561 0.053278631 0.054911800 0.055010191 0.056281409 0.056451667 0.056619401 0.057078647 0.057248800 0.059252652 0.060659491 0.061090633 0.061936367 0.062421458 0.063449565 0.064543473 0.065333097 0.066198142 0.066630535 0.068608799 0.069326948 0.070293613 0.072892633 0.074493003 0.074805261 0.076535009 0.079346943 0.084583624 0.087005022 0.087309384 0.087780633 0.089873936 0.090730216 0.091732854 0.094343521 0.095509126 0.095970190 0.096539934 0.097879321 0.098850928 0.100247622 0.100878500 0.102483343 0.103246095 0.103713470 0.104476047 0.104648039 0.105469445 0.106378408 0.107124905 0.108262394 0.110179801 0.111224234 0.112597873 0.113574550 0.115162386 0.116298870 0.116883955 0.118788640 0.121398694 0.122563925 0.123879503 0.125570786 0.126337541 0.126454568 0.126826650 0.127955860 0.132210538 0.135172076 0.135960446 0.143227614 0.144134674 0.147227426 0.147588588 0.149834454 0.151203254 0.154694531 0.154799825 0.156760293 0.161329943 0.162055367 0.173863173 0.174488150 0.182306153 0.185680946 0.186604857 0.189728338 0.190468534 0.194529231 0.195921900 0.199070875 0.200459225 0.205300200 0.207214018 0.207600433 0.210307190 0.216877273 0.217515038 0.218016023 0.220893049 0.221232745 0.225446702 0.226808953 0.232433891 0.235265081 0.235774147 0.236132806 0.244811017 0.256145849 0.257400951 0.264034333 0.269969530 0.280792007 0.283973706 0.286419438 0.291990072 0.297091509 0.304613912 0.306049866 0.307398286 0.314740722 0.316854772 0.317478178 0.322273342 0.330201921 0.333243915 0.351841263 0.353063797 0.355598275 0.356095714 0.360110119 0.363195085 0.364625040 0.383964995 0.386075653 0.392321461 0.410706307 0.426161214 0.431319947 0.462536796 0.469620549 0.479235524 0.484633852 0.484717652 0.487508240 0.491513708 0.509951651 0.515482620 0.535278236 0.569579303 0.575441847 0.591224820 0.594330123 0.607521770 0.608510783 0.645087848 0.648018166 0.649914187 0.674568386 0.678459253 0.688316821 0.693538141 0.694252328 0.700430592 0.705320376 0.718569627 0.742346591 0.751464405 0.759485949 0.772222019 0.774847117 0.779833534 0.811179523 0.816762250 0.820528133 0.823325055 0.823800147 0.832496241 0.835110382 0.838299908 0.842819683 0.845972365 0.847847587 0.850301993 0.859903026 0.866017866 0.869210941 0.874913044 0.886668304 0.889306970 0.889987740 0.900916782 0.901165355 0.904383513 0.924270756 0.928342262 0.936918348 0.938299703 0.966448825 0.977659516 0.987506962 1.002024386 1.020437508 1.028861322 1.042844494 1.052984882 1.059193916 1.069390602 1.087058653 1.089200902 1.105655459 1.112078821 1.113124096 1.129834731 1.136589666 1.141394706 1.145741431 1.176912193 1.179236354 1.181953435 1.187738884 1.191699781 1.198846208 1.225223478 1.229093928 1.275161654 1.303125861 1.321470095 1.328523957 1.333527617 1.336742505 1.337814289 1.341983289 1.344790557 1.345515000 1.360000375 1.379783862 1.383557481 1.386305121 1.405181330 1.421394109 1.430729532 1.551524846 1.687304637 1.777065863</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">334</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34357341" y3="0.04777346" z3="-0.19285768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.39015752" y3="0.16258459" z3="0.41477172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.65061432" y3="0.43695934" z3="-0.34373441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73150329" y3="1.23221958" z3="-2.26281973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39146554" y3="0.43183217" z3="-1.18465571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72971802" y3="0.84434769" z3="-3.66074461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63661571" y3="1.74551164" z3="-3.13470742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38423138" y3="2.59119917" z3="-4.61367218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56216999" y3="1.2500225" z3="-4.37263527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5052814" y3="2.9277872" z3="-5.17221954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92378238" y3="-0.48618467" z3="-3.44015439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.10107021" y3="0.04373689" z3="-1.00074175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4015253" y3="-1.09895824" z3="-1.99924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.93038356" y3="-0.96760005" z3="-1.82296987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10324732" y3="-2.42395663" z3="-1.84700309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14123992" y3="-3.61384416" z3="0.67019808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01227458" y3="-5.25034096" z3="-4.74623156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24097304" y3="-4.99443367" z3="-3.70816075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.83948003" y3="-4.30760614" z3="-1.08812428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78340942" y3="-4.58705753" z3="-2.85550166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55689289" y3="-5.08518262" z3="-3.25062383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85700276" y3="-4.73636366" z3="-1.93624045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49617844" y3="-4.25850447" z3="-1.52910179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81652664" y3="-4.50632681" z3="-3.20201443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35602314" y3="-5.39778268" z3="-3.92663793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89370735" y3="-4.77496283" z3="-1.59331931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02930434" y3="-3.86004895" z3="0.23282967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16961326" y3="-3.65098413" z3="0.87887823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05604892" y3="-4.11672355" z3="0.44594431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16337681" y3="-3.51642036" z3="2.34591816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21860015" y3="-3.33491345" z3="5.14398493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.35713555" y3="-3.72968226" z3="3.05069471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99696525" y3="-3.21782513" z3="3.0661615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02197778" y3="-3.12774828" z3="4.45489293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3837001" y3="-3.64135563" z3="4.43974397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27186422" y3="-3.97431483" z3="2.50329206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03921729" y3="-3.07630301" z3="2.56017758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09334272" y3="-2.91587784" z3="4.99260876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31981648" y3="-3.81921578" z3="4.97607741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23739183" y3="-3.27279065" z3="6.23564302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41593017" y3="-3.89440853" z3="-0.6245798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17504299" y3="-3.39092329" z3="-1.07712233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52075379" y3="0.2454071" z3="-4.71011313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08364835" y3="-1.72685711" z3="0.02286178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90779601" y3="-0.97771165" z3="1.18525857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84537125" y3="-0.32818155" z3="1.51812363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3799682" y3="0.56126386" z3="1.22115693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46166071" y3="1.45299193" z3="-0.40928661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9837311" y3="-0.68105583" z3="1.40834452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3856418" y3="1.76124728" z3="2.66012109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88156218" y3="-0.97016364" z3="2.08430836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65213838" y3="-0.35802543" z3="3.34365614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21292829" y3="0.76151849" z3="-1.23262286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30408027" y3="2.2512445" z3="-0.4051766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44597596" y3="1.92556326" z3="-0.57564436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01363485" y3="-1.04171426" z3="2.45028862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.9541446" y3="-0.21271462" z3="1.16964445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86642946" y3="-1.52688733" z3="0.71194301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4372989" y3="1.22670367" z3="3.62525562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54217588" y3="2.36193879" z3="2.65745904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23745963" y3="2.46247226" z3="2.60413309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78915805" y3="-0.8145328" z3="3.85454449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56629559" y3="-0.53357311" z3="3.92616029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48265771" y3="0.72458204" z3="3.224866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84360117" y3="-0.70750122" z3="0.99070934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41074203" y3="-2.03243339" z3="0.85156241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7572346" y3="-2.67613446" z3="1.89494996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.5540469" y3="-1.98230505" z3="3.08465133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03937106" y3="-0.6926814" z3="3.28017604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.69243353" y3="-0.06237701" z3="2.22560908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51326871" y3="-2.53084448" z3="-0.11314758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35614375" y3="-3.68295679" z3="1.77122429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69196205" y3="-2.57904132" z3="4.10977104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.86057517" y3="-0.18209952" z3="4.22659028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.04034669" y3="0.96774428" z3="2.34120996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7952445" y3="0.46686483" z3="-4.28232051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77652483" y3="-0.49956203" z3="-4.46037763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43138841" y3="-1.69113267" z3="-5.08718997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14601077" y3="-1.9229803" z3="-5.56659217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82813017" y3="-0.9533633" z3="-5.36785217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03777274" y3="1.38984334" z3="-3.74974203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79429994" y3="-0.35272818" z3="-4.09771629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44497247" y3="-2.73871047" z3="-5.2261802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08262441" y3="-2.86316018" z3="-6.06933624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84912258" y3="-1.13985578" z3="-5.70498418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36373796" y3="-1.88318335" z3="5.05069275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31362276" y3="-3.71991972" z3="3.94310738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22281237" y3="-3.64257078" z3="-6.00338281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44764444" y3="-2.64989767" z3="-4.54548038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07524914" y3="1.15746225" z3="-1.49327995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11464702" y3="1.54680981" z3="-2.47169038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44442828" y3="1.48560471" z3="-1.69181553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85466437" y3="2.14935158" z3="-2.82180486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.17076735" y3="1.18782026" z3="-0.92922702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91135941" y3="2.39062899" z3="-2.96647428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57527032" y3="2.21535472" z3="-3.64024255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90713506" y3="2.50751341" z3="-3.81056856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85415011" y3="2.48818648" z3="-4.41415406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23878783" y3="3.015763" z3="-4.7207339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40753816" y3="3.14966006" z3="-3.33212125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2923553" y3="3.56340245" z3="-4.1188721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21672123" y3="4.1598338" z3="-2.73886712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.9677005" y3="5.49298682" z3="-2.96276396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04518481" y3="3.87002087" z3="-2.0906359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60587683" y3="6.24767817" z3="-2.49463539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06931977" y3="4.94963856" z3="-4.34468689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89140519" y3="5.89756133" z3="-3.78757347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21794371" y3="5.24834823" z3="-4.96414352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70863758" y3="6.96102203" z3="-3.96523779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48127239" y3="-2.20644658" z3="-0.29523222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45153767" y3="-2.99838656" z3="-1.0630755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00851211" y3="-2.59021603" z3="0.59323848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09733524" y3="-1.38704575" z3="-0.71155109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18083537" y3="-1.42742061" z3="-1.14731747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31880693" y3="-0.38643889" z3="-1.49258227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10407736" y3="-1.55218356" z3="-0.94312903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42226227" y3="-2.07970569" z3="-2.00009869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3436,.0478,-.1929;7.3902,.1626,.4148;6.6506,.437,-.3437;4.7315,1.2322,-2.2628;4.3915,.4318,-1.1847;2.7297,.8443,-3.6607;3.6366,1.7455,-3.1347;1.3842,2.5912,-4.6137;1.5622,1.25,-4.3726;.5053,2.9278,-5.1722;2.9238,-.4862,-3.4402;3.1011,.0437,-1.0007;2.4015,-1.099,-1.9992;.9304,-.9676,-1.823;3.1032,-2.424,-1.847;-.1412,-3.6138,.6702;-.0123,-5.2503,-4.7462;-.241,-4.9944,-3.7082;-.8395,-4.3076,-1.0881;.7834,-4.5871,-2.8555;-1.5569,-5.0852,-3.2506;-1.857,-4.7364,-1.9362;.4962,-4.2585,-1.5291;1.8165,-4.5063,-3.202;-2.356,-5.3978,-3.9266;-2.8937,-4.775,-1.5933;-1.0293,-3.86,.2328;-2.1696,-3.651,.8789;-3.056,-4.1167,.4459;-2.1634,-3.5164,2.3459;-2.2186,-3.3349,5.144;-3.3571,-3.7297,3.0507;-.997,-3.2178,3.0662;-1.022,-3.1277,4.4549;-3.3837,-3.6414,4.4397;-4.2719,-3.9743,2.5033;-.0392,-3.0763,2.5602;-.0933,-2.9159,4.9926;-4.3198,-3.8192,4.9761;-2.2374,-3.2728,6.2356;1.4159,-3.8944,-.6246;2.175,-3.3909,-1.0771;.5208,.2454,-4.7101;-3.0836,-1.7269,.0229;-2.9078,-.9777,1.1853;-1.8454,-.3282,1.5181;-.38,.5613,1.2212;-.4617,1.453,-.4093;.9837,-.6811,1.4083;-.3856,1.7612,2.6601;-3.8816,-.9702,2.0843;-3.6521,-.358,3.3437;-.2129,.7615,-1.2326;.3041,2.2512,-.4052;-1.446,1.9256,-.5756;1.0136,-1.0417,2.4503;1.9541,-.2127,1.1696;.8664,-1.5269,.7119;-.4373,1.2267,3.6253;.5422,2.3619,2.6575;-1.2375,2.4625,2.6041;-2.7892,-.8145,3.8545;-4.5663,-.5336,3.9262;-3.4827,.7246,3.2249;4.8436,-.7075,.9907;4.4107,-2.0324,.8516;3.7572,-2.6761,1.8949;3.554,-1.9823,3.0847;4.0394,-.6927,3.2802;4.6924,-.0624,2.2256;4.5133,-2.5308,-.1131;3.3561,-3.683,1.7712;2.692,-2.579,4.1098;3.8606,-.1821,4.2266;5.0403,.9677,2.3412;-.7952,.4669,-4.2823;-1.7765,-.4996,-4.4604;-1.4314,-1.6911,-5.0872;-.146,-1.923,-5.5666;.8281,-.9534,-5.3679;-1.0378,1.3898,-3.7497;-2.7943,-.3527,-4.0977;-2.445,-2.7387,-5.2262;.0826,-2.8632,-6.0693;1.8491,-1.1399,-5.705;2.3637,-1.8832,5.0507;2.3136,-3.7199,3.9431;-2.2228,-3.6426,-6.0034;-3.4476,-2.6499,-4.5455;7.0752,1.1575,-1.4933;6.1146,1.5468,-2.4717;8.4444,1.4856,-1.6918;8.8547,2.1494,-2.8218;9.1708,1.1878,-.9292;9.9114,2.3906,-2.9665;6.5753,2.2154,-3.6402;7.9071,2.5075,-3.8106;5.8542,2.4882,-4.4142;8.2388,3.0158,-4.7207;3.4075,3.1497,-3.3321;2.2924,3.5634,-4.1189;4.2167,4.1598,-2.7389;3.9677,5.493,-2.9628;5.0452,3.87,-2.0906;4.6059,6.2477,-2.4946;2.0693,4.9496,-4.3447;2.8914,5.8976,-3.7876;1.2179,5.2483,-4.9641;2.7086,6.961,-3.9652;-4.4813,-2.2064,-.2952;-4.4515,-2.9984,-1.0631;-5.0085,-2.5902,.5932;-5.0973,-1.387,-.7116;-2.1808,-1.4274,-1.1473;-2.3188,-.3864,-1.4926;-1.1041,-1.5522,-.9431;-2.4223,-2.0797,-2.0001;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650423109073</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000947281625 0.000180824631 0.020034244985 0.005341078169</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030803163 -0.000227265 0.000068542 0.000126351 0.000207486 0.000288873 0.000333926 0.000420377 0.000630555 0.000812300 0.000874148 0.000912348 0.001045266 0.001202562 0.001451800 0.001482387 0.001569923 0.001689284 0.001724130 0.001921655 0.001947234 0.002210115 0.002316296 0.002533898 0.002681140 0.002979325 0.003015458 0.003079933 0.003672630 0.003931365 0.004443471 0.004668943 0.004778475 0.005106179 0.005981968 0.006063829 0.006290634 0.006678378 0.006848424 0.007506449 0.007972025 0.008242118 0.008404976 0.009425802 0.009451151 0.010005755 0.010104699 0.011254081 0.011906602 0.012203638 0.012993073 0.013120893 0.014354940 0.014882901 0.015321904 0.015807163 0.015958082 0.016414687 0.016801025 0.017380891 0.018198755 0.018771430 0.018902157 0.019687226 0.020145962 0.020576623 0.021191433 0.021388419 0.021597846 0.023040515 0.023457626 0.026651441 0.026907070 0.028146905 0.028389809 0.029650238 0.030571560 0.031658483 0.033256805 0.033753216 0.034169483 0.035735546 0.036637243 0.037248505 0.038557164 0.039633709 0.040202239 0.041141997 0.042600027 0.044716208 0.045813278 0.047248634 0.048096561 0.049297446 0.050568524 0.051088213 0.051315323 0.051843246 0.052511161 0.052829920 0.052970690 0.053279045 0.054914099 0.055010750 0.056281392 0.056454099 0.056619726 0.057078817 0.057249049 0.059253255 0.060659407 0.061090568 0.061937145 0.062421351 0.063450030 0.064543700 0.065333325 0.066198412 0.066633642 0.068610876 0.069328529 0.070293592 0.072898186 0.074492396 0.074805379 0.076535208 0.079347269 0.084583998 0.087006888 0.087309470 0.087781446 0.089882417 0.090733664 0.091735669 0.094348247 0.095586487 0.095976752 0.096549227 0.097879302 0.098850997 0.100247870 0.100887422 0.102484501 0.103248361 0.103717089 0.104476623 0.104648173 0.105469448 0.106378404 0.107125092 0.108262017 0.110183005 0.111225292 0.112601040 0.113577608 0.115163420 0.116298858 0.116885097 0.118788641 0.121399015 0.122564019 0.123880728 0.125573868 0.126342059 0.126454532 0.126827025 0.127959981 0.132210613 0.135175466 0.135961349 0.143232838 0.144136232 0.147232168 0.147588007 0.149834603 0.151205506 0.154695075 0.154801510 0.156759295 0.161332785 0.162057310 0.173870479 0.174489269 0.182306425 0.185695039 0.186605685 0.189729850 0.190469795 0.194531042 0.195934172 0.199080896 0.200459744 0.205301422 0.207215318 0.207602068 0.210307238 0.216877354 0.217515142 0.218016038 0.220893102 0.221268315 0.225448005 0.226809263 0.232434323 0.235266809 0.235776174 0.236132816 0.244811748 0.256145967 0.257401035 0.264035674 0.269970232 0.280792019 0.283974348 0.286419487 0.291990072 0.297091536 0.304617119 0.306049948 0.307398461 0.314743535 0.316855599 0.317483147 0.322273381 0.330202098 0.333257134 0.351842736 0.353064047 0.355600086 0.356097817 0.360112115 0.363196993 0.364625127 0.383966277 0.386075977 0.392329941 0.410707412 0.426162600 0.431323143 0.462537001 0.469621381 0.479237791 0.484634310 0.484717918 0.487508858 0.491515951 0.509951844 0.515482760 0.535279032 0.569580413 0.575443357 0.591230868 0.594333467 0.607526575 0.608511265 0.645096931 0.648019171 0.649914567 0.674575319 0.678459474 0.688320007 0.693538449 0.694254443 0.700432234 0.705392246 0.718569914 0.742346975 0.751465461 0.759486005 0.772222176 0.774847856 0.779834567 0.811186874 0.816768367 0.820538252 0.823325770 0.823801720 0.832504219 0.835112483 0.838313106 0.842821314 0.845972647 0.847856731 0.850312243 0.859905590 0.866023854 0.869224595 0.874941011 0.886668435 0.889308149 0.889995211 0.900916986 0.901169997 0.904410995 0.924274916 0.928342867 0.936919493 0.938301591 0.966460832 0.977719959 0.987528740 1.002035394 1.020443549 1.028861674 1.042857283 1.052985345 1.059194111 1.069409019 1.087058676 1.089202011 1.105666479 1.112088379 1.113129655 1.129864129 1.136589678 1.141408876 1.145742086 1.176912340 1.179239174 1.181964431 1.187738894 1.191700664 1.198855555 1.225258445 1.229094020 1.275199155 1.303127828 1.321472024 1.328524540 1.333535026 1.336743402 1.337814424 1.341984858 1.344790861 1.345516993 1.360001451 1.379784266 1.383557498 1.386305386 1.405193594 1.421394787 1.430731550 1.551525586 1.687329006 1.777069175</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">335</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33753229" y3="0.04954233" z3="-0.18810793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38215571" y3="0.17007263" z3="0.42565039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64425626" y3="0.44237638" z3="-0.33521335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7287809" y3="1.23212631" z3="-2.26033471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38727447" y3="0.43143495" z3="-1.18248354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72928074" y3="0.84196076" z3="-3.66165404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63539321" y3="1.74394999" z3="-3.13501548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38700514" y3="2.58756155" z3="-4.62148945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56307623" y3="1.24673842" z3="-4.3764208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50955045" y3="2.92328244" z3="-5.18291892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.923064" y3="-0.48840974" z3="-3.44025545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09701758" y3="0.04174516" z3="-1.00083109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40049406" y3="-1.10235974" z3="-1.99991296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92897823" y3="-0.97360672" z3="-1.82469143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1043326" y3="-2.42618697" z3="-1.84729254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.13901125" y3="-3.6155785" z3="0.6665844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01666962" y3="-5.25088708" z3="-4.75060214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24451381" y3="-4.99390385" z3="-3.71252633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84063658" y3="-4.30477016" z3="-1.09234488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78127607" y3="-4.58952121" z3="-2.86002979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56095532" y3="-5.08011227" z3="-3.25477354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8599086" y3="-4.72998921" z3="-1.94038092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49519121" y3="-4.25998357" z3="-1.53353809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81431269" y3="-4.51161516" z3="-3.20664906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.36015752" y3="-5.39168342" z3="-3.93032655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89669039" y3="-4.76509074" z3="-1.597268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02861313" y3="-3.85765833" z3="0.22906411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16815748" y3="-3.64906436" z3="0.87683084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05534825" y3="-4.11386482" z3="0.4440873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16035673" y3="-3.51808635" z3="2.34424495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.21306591" y3="-3.34520598" z3="5.14288796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3537441" y3="-3.73287105" z3="3.04935115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99338894" y3="-3.22167872" z3="3.06433934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.01706935" y3="-3.13615302" z3="4.45344427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.37943024" y3="-3.64838355" z3="4.43858885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.26803076" y3="-3.97696594" z3="2.50213769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03637429" y3="-3.07827536" z3="2.55776724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.08838023" y3="-2.92574317" z3="4.99133321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.31522326" y3="-3.82754544" z3="4.9750787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.23090796" y3="-3.28634212" z3="6.23471693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41625957" y3="-3.89939433" z3="-0.62888031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17632456" y3="-3.39592" z3="-1.08057929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52029445" y3="0.24344321" z3="-4.71135296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08438733" y3="-1.72432733" z3="0.02669979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90428494" y3="-0.97567226" z3="1.18913119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84179927" y3="-0.32443405" z3="1.51789192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37638114" y3="0.56397103" z3="1.21828839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45751597" y3="1.45224368" z3="-0.41418092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98553592" y3="-0.67975027" z3="1.40691814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.38040906" y3="1.7666576" z3="2.65431795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87418077" y3="-0.97033525" z3="2.09247818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.63959004" y3="-0.36099436" z3="3.35210733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.20993801" y3="0.75885085" z3="-1.23616856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30898814" y3="2.24972312" z3="-0.41225839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.4413516" y3="1.92555185" z3="-0.58098824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01401015" y3="-1.0402031" z3="2.44840589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95582794" y3="-0.21239966" z3="1.16843939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.86636942" y3="-1.52505969" z3="0.70937027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.4313092" y3="1.23423802" z3="3.62055009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.54797309" y3="2.36634636" z3="2.6493869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.23156169" y3="2.4682557" z3="2.59746484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.77430178" y3="-0.81824205" z3="3.85801455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55112912" y3="-0.5383753" z3="3.93830447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47061257" y3="0.72209091" z3="3.23517662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83745329" y3="-0.70614832" z3="0.99505521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.40818705" y3="-2.03189039" z3="0.85652947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75686849" y3="-2.6772816" z3="1.90029269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55113972" y3="-1.98375554" z3="3.08868264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.03312633" y3="-0.69296639" z3="3.28393923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68464317" y3="-0.06114512" z3="2.22941608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50854841" y3="-2.52893464" z3="-0.11086414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35839525" y3="-3.68507576" z3="1.77714318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69149321" y3="-2.58271456" z3="4.11451462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.85523441" y3="-0.18359655" z3="4.23223351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.03111675" y3="0.96959815" z3="2.34538835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7954195" y3="0.4675389" z3="-4.28484017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77844561" y3="-0.49705287" z3="-4.4610592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43520138" y3="-1.68951891" z3="-5.08752633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.15025057" y3="-1.92429185" z3="-5.56755141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82592593" y3="-0.95650921" z3="-5.36825502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03669039" y3="1.39165145" z3="-3.75290896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79628657" y3="-0.34797007" z3="-4.09991789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.45108985" y3="-2.73518459" z3="-5.22807307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.07601129" y3="-2.86503792" z3="-6.06891182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84653999" y3="-1.14527786" z3="-5.70508601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36007142" y3="-1.88643519" z3="5.05472381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31912605" y3="-3.72578123" z3="3.95015029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.23225682" y3="-3.6366912" z3="-6.00862184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.45203888" y3="-2.64713285" z3="-4.54480617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07058558" y3="1.16260844" z3="-1.48410256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11207344" y3="1.54860859" z3="-2.46589385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43936819" y3="1.49314039" z3="-1.67852565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85179383" y3="2.15770408" z3="-2.80756808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16366356" y3="1.19770605" z3="-0.91316055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90837794" y3="2.40208019" z3="-2.94877569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57481102" y3="2.21575157" z3="-3.6340924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90664798" y3="2.51199242" z3="-3.80002244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85539248" y3="2.48490337" z3="-4.41100309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.2399675" y3="3.01864702" z3="-4.70982051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4077364" y3="3.14767118" z3="-3.33649369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29520203" y3="3.56029911" z3="-4.12761519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21630083" y3="4.15859522" z3="-2.74424354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96967722" y3="5.4913809" z3="-2.97348688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04222056" y3="3.87009787" z3="-2.09220041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60708515" y3="6.24713288" z3="-2.50541806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07467068" y3="4.94614576" z3="-4.3589521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89653249" y3="5.89479641" z3="-3.80302909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22580058" y3="5.24362074" z3="-4.98239444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71600952" y3="6.95788254" z3="-3.98527204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48361133" y3="-2.20348588" z3="-0.28629284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45662371" y3="-2.992123" z3="-1.05707359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00589416" y3="-2.59080711" z3="0.60300444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.10302348" y3="-1.38328368" z3="-0.69676858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18607678" y3="-1.42390421" z3="-1.14678842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32476171" y3="-0.38192876" z3="-1.49044011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10891773" y3="-1.54895676" z3="-0.94572997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42971482" y3="-2.07552377" z3="-1.99911054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3375,.0495,-.1881;7.3822,.1701,.4257;6.6443,.4424,-.3352;4.7288,1.2321,-2.2603;4.3873,.4314,-1.1825;2.7293,.842,-3.6617;3.6354,1.7439,-3.135;1.387,2.5876,-4.6215;1.5631,1.2467,-4.3764;.5096,2.9233,-5.1829;2.9231,-.4884,-3.4403;3.097,.0417,-1.0008;2.4005,-1.1024,-1.9999;.929,-.9736,-1.8247;3.1043,-2.4262,-1.8473;-.139,-3.6156,.6666;-.0167,-5.2509,-4.7506;-.2445,-4.9939,-3.7125;-.8406,-4.3048,-1.0923;.7813,-4.5895,-2.86;-1.561,-5.0801,-3.2548;-1.8599,-4.73,-1.9404;.4952,-4.26,-1.5335;1.8143,-4.5116,-3.2066;-2.3602,-5.3917,-3.9303;-2.8967,-4.7651,-1.5973;-1.0286,-3.8577,.2291;-2.1682,-3.6491,.8768;-3.0553,-4.1139,.4441;-2.1604,-3.5181,2.3442;-2.2131,-3.3452,5.1429;-3.3537,-3.7329,3.0494;-.9934,-3.2217,3.0643;-1.0171,-3.1362,4.4534;-3.3794,-3.6484,4.4386;-4.268,-3.977,2.5021;-.0364,-3.0783,2.5578;-.0884,-2.9257,4.9913;-4.3152,-3.8275,4.9751;-2.2309,-3.2863,6.2347;1.4163,-3.8994,-.6289;2.1763,-3.3959,-1.0806;.5203,.2434,-4.7114;-3.0844,-1.7243,.0267;-2.9043,-.9757,1.1891;-1.8418,-.3244,1.5179;-.3764,.564,1.2183;-.4575,1.4522,-.4142;.9855,-.6798,1.4069;-.3804,1.7667,2.6543;-3.8742,-.9703,2.0925;-3.6396,-.361,3.3521;-.2099,.7589,-1.2362;.309,2.2497,-.4123;-1.4414,1.9256,-.581;1.014,-1.0402,2.4484;1.9558,-.2124,1.1684;.8664,-1.5251,.7094;-.4313,1.2342,3.6206;.548,2.3663,2.6494;-1.2316,2.4683,2.5975;-2.7743,-.8182,3.858;-4.5511,-.5384,3.9383;-3.4706,.7221,3.2352;4.8375,-.7061,.9951;4.4082,-2.0319,.8565;3.7569,-2.6773,1.9003;3.5511,-1.9838,3.0887;4.0331,-.693,3.2839;4.6846,-.0611,2.2294;4.5085,-2.5289,-.1109;3.3584,-3.6851,1.7771;2.6915,-2.5827,4.1145;3.8552,-.1836,4.2322;5.0311,.9696,2.3454;-.7954,.4675,-4.2848;-1.7784,-.4971,-4.4611;-1.4352,-1.6895,-5.0875;-.1503,-1.9243,-5.5676;.8259,-.9565,-5.3683;-1.0367,1.3917,-3.7529;-2.7963,-.348,-4.0999;-2.4511,-2.7352,-5.2281;.076,-2.865,-6.0689;1.8465,-1.1453,-5.7051;2.3601,-1.8864,5.0547;2.3191,-3.7258,3.9502;-2.2323,-3.6367,-6.0086;-3.452,-2.6471,-4.5448;7.0706,1.1626,-1.4841;6.1121,1.5486,-2.4659;8.4394,1.4931,-1.6785;8.8518,2.1577,-2.8076;9.1637,1.1977,-.9132;9.9084,2.4021,-2.9488;6.5748,2.2158,-3.6341;7.9066,2.512,-3.8;5.8554,2.4849,-4.411;8.24,3.0186,-4.7098;3.4077,3.1477,-3.3365;2.2952,3.5603,-4.1276;4.2163,4.1586,-2.7442;3.9697,5.4914,-2.9735;5.0422,3.8701,-2.0922;4.6071,6.2471,-2.5054;2.0747,4.9461,-4.359;2.8965,5.8948,-3.803;1.2258,5.2436,-4.9824;2.716,6.9579,-3.9853;-4.4836,-2.2035,-.2863;-4.4566,-2.9921,-1.0571;-5.0059,-2.5908,.603;-5.103,-1.3833,-.6968;-2.1861,-1.4239,-1.1468;-2.3248,-.3819,-1.4904;-1.1089,-1.549,-.9457;-2.4297,-2.0755,-1.9991;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650420283666</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001184670165 0.000211556749 0.021780164199 0.005278855704</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030803817 -0.000273245 0.000086396 0.000186199 0.000200130 0.000282327 0.000310151 0.000407959 0.000607176 0.000811438 0.000874863 0.000912526 0.001046115 0.001203246 0.001455106 0.001481697 0.001570777 0.001688045 0.001728282 0.001921261 0.001955969 0.002210147 0.002312569 0.002533879 0.002682318 0.002982780 0.003014566 0.003079997 0.003674937 0.003936212 0.004447969 0.004669109 0.004779164 0.005107416 0.005975124 0.006060988 0.006290477 0.006678450 0.006848513 0.007499657 0.007970736 0.008242173 0.008405103 0.009427306 0.009450249 0.009998453 0.010103836 0.011258628 0.011912824 0.012203376 0.012990505 0.013113756 0.014349923 0.014894809 0.015318828 0.015800860 0.015963090 0.016403290 0.016801855 0.017375018 0.018190120 0.018752031 0.018904994 0.019690166 0.020144523 0.020582306 0.021184349 0.021390627 0.021585820 0.023043011 0.023454117 0.026658363 0.026906767 0.028151567 0.028390413 0.029652026 0.030573349 0.031658165 0.033257416 0.033753137 0.034170706 0.035733321 0.036591040 0.037249308 0.038540985 0.039633195 0.040204415 0.041141861 0.042599916 0.044716387 0.045814098 0.047256192 0.048097737 0.049301856 0.050569296 0.051087987 0.051315798 0.051844044 0.052512420 0.052831614 0.052970799 0.053279737 0.054915502 0.055010552 0.056283007 0.056460622 0.056619926 0.057078900 0.057249827 0.059254101 0.060659466 0.061090932 0.061937080 0.062421555 0.063450801 0.064545231 0.065333299 0.066200017 0.066638942 0.068612052 0.069330700 0.070293227 0.072902276 0.074492883 0.074805196 0.076535761 0.079347424 0.084583743 0.087008962 0.087309724 0.087782230 0.089892239 0.090738393 0.091734347 0.094352090 0.095710896 0.095991982 0.096565446 0.097879311 0.098850546 0.100249143 0.100905810 0.102485187 0.103252739 0.103721804 0.104477348 0.104650090 0.105471111 0.106379072 0.107125343 0.108261368 0.110186320 0.111227226 0.112603567 0.113582182 0.115163697 0.116298956 0.116888149 0.118788781 0.121399693 0.122563276 0.123885062 0.125575996 0.126345869 0.126456886 0.126827697 0.127964615 0.132211191 0.135177951 0.135961925 0.143238630 0.144137817 0.147233706 0.147587881 0.149836047 0.151182034 0.154692758 0.154797753 0.156761801 0.161334884 0.162058279 0.173886505 0.174492690 0.182308502 0.185722908 0.186605045 0.189729928 0.190471352 0.194530963 0.195954009 0.199095094 0.200459986 0.205301459 0.207218143 0.207603273 0.210307276 0.216877096 0.217517406 0.218015439 0.220893033 0.221305894 0.225451269 0.226810106 0.232434973 0.235267810 0.235781453 0.236132741 0.244812467 0.256145943 0.257401188 0.264037091 0.269970131 0.280791870 0.283976518 0.286419830 0.291990021 0.297091749 0.304621367 0.306050037 0.307398375 0.314742864 0.316856102 0.317489657 0.322273477 0.330200785 0.333270970 0.351845149 0.353064589 0.355600911 0.356102563 0.360114120 0.363199528 0.364625667 0.383964294 0.386077841 0.392338122 0.410709134 0.426163262 0.431324211 0.462537635 0.469615941 0.479242810 0.484637156 0.484719120 0.487508897 0.491517414 0.509952501 0.515477423 0.535273136 0.569581237 0.575442735 0.591232741 0.594339301 0.607534008 0.608511609 0.645104167 0.648025140 0.649914878 0.674586072 0.678454740 0.688325090 0.693537549 0.694257956 0.700432385 0.705496689 0.718568829 0.742346311 0.751466106 0.759486041 0.772222147 0.774851155 0.779835497 0.811192491 0.816773434 0.820542073 0.823325770 0.823805634 0.832514775 0.835117990 0.838330990 0.842821115 0.845973045 0.847870693 0.850324035 0.859912574 0.866029532 0.869247438 0.874975182 0.886668643 0.889313076 0.890000734 0.900916771 0.901177762 0.904443477 0.924279834 0.928344151 0.936921018 0.938303509 0.966476581 0.977814765 0.987570729 1.002050210 1.020452498 1.028861807 1.042875513 1.052986641 1.059196816 1.069434106 1.087058670 1.089204099 1.105675918 1.112109925 1.113139946 1.129901031 1.136590000 1.141425512 1.145744003 1.176912461 1.179242715 1.181978049 1.187739810 1.191701505 1.198866550 1.225297779 1.229095595 1.275206889 1.303131757 1.321475378 1.328525215 1.333541004 1.336742783 1.337805651 1.341982601 1.344792754 1.345519986 1.360002578 1.379784465 1.383557380 1.386309698 1.405140957 1.421397313 1.430709866 1.551525897 1.687359283 1.777075002</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">336</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33909086" y3="0.05176057" z3="-0.19152471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38499966" y3="0.1668068" z3="0.41907362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64659448" y3="0.44126459" z3="-0.34051619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73032373" y3="1.23566908" z3="-2.2628755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38844171" y3="0.43582688" z3="-1.18460411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73053569" y3="0.84641626" z3="-3.66322051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63688702" y3="1.74823421" z3="-3.13701166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.386629" y3="2.59227562" z3="-4.62026401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56369618" y3="1.25126929" z3="-4.37688235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50837797" y3="2.92820491" z3="-5.18032221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92441977" y3="-0.48388753" z3="-3.44127609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09772842" y3="0.04805358" z3="-1.00211519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.4004034" y3="-1.09613698" z3="-2.00071836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92890035" y3="-0.9657912" z3="-1.82707314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10299991" y3="-2.4204046" z3="-1.84607049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14098417" y3="-3.61563561" z3="0.67308998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01153621" y3="-5.24815656" z3="-4.74507602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24042272" y3="-4.99248396" z3="-3.70694666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.8393199" y3="-4.30668377" z3="-1.08661921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78360424" y3="-4.58396993" z3="-2.8544505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55631433" y3="-5.084527" z3="-3.24919859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85661661" y3="-4.73625112" z3="-1.93465981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49617185" y3="-4.25588822" z3="-1.52792312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81641" y3="-4.50167261" z3="-3.201118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35467597" y3="-5.39852065" z3="-3.92502062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8932084" y3="-4.77612125" z3="-1.59140122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.02939893" y3="-3.86024735" z3="0.23475334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.16993611" y3="-3.65142876" z3="0.88059022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05652386" y3="-4.11618226" z3="0.44668367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16454712" y3="-3.51851699" z3="2.3477784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22153272" y3="-3.34005625" z3="5.14601829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3594437" y3="-3.72991411" z3="3.05134191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99812835" y3="-3.22338568" z3="3.06932024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02392572" y3="-3.13484637" z3="4.45814697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.3871102" y3="-3.64279059" z3="4.44040161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27356545" y3="-3.97294872" z3="2.50308556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03972925" y3="-3.08378146" z3="2.56426371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09544435" y3="-2.92513873" z3="4.99669534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3240896" y3="-3.81914965" z3="4.97572113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24117212" y3="-3.27888618" z3="6.23769669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41572814" y3="-3.89104987" z3="-0.6234554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17516232" y3="-3.38749354" z3="-1.07598751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.5216653" y3="0.24711689" z3="-4.71211571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08440641" y3="-1.72663077" z3="0.0259418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90805616" y3="-0.97700828" z3="1.18816862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84703375" y3="-0.32469319" z3="1.51984885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37691543" y3="0.55617728" z3="1.22019238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45907827" y3="1.45268035" z3="-0.40766505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98079976" y3="-0.69345351" z3="1.40005445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.37035313" y3="1.7515808" z3="2.66244107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88079068" y3="-0.97082882" z3="2.08843618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65032387" y3="-0.35917964" z3="3.34776605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21556764" y3="0.76262613" z3="-1.23365064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31025871" y3="2.24736931" z3="-0.40363748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44168767" y3="1.93018289" z3="-0.56976398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01183902" y3="-1.05607113" z3="2.44082507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95170731" y3="-0.22770956" z3="1.15987769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85825068" y3="-1.53707434" z3="0.70139296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.42327517" y3="1.21425504" z3="3.62587759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5623629" y3="2.3445662" z3="2.6590107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21660807" y3="2.45954659" z3="2.6110759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78651722" y3="-0.81535524" z3="3.85732761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5636548" y3="-0.53568104" z3="3.9312871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48136309" y3="0.72360402" z3="3.22935658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83827516" y3="-0.70355079" z3="0.99166697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41207068" y3="-2.03045808" z3="0.85379002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.75944219" y3="-2.67575544" z3="1.89682671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54980141" y3="-1.98109692" z3="3.08420284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02843291" y3="-0.68890931" z3="3.2787538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.6809573" y3="-0.05711201" z3="2.22483062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51666286" y3="-2.52883287" z3="-0.11187232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36304169" y3="-3.68442748" z3="1.77386647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68837963" y3="-2.58011185" z3="4.10856778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84644443" y3="-0.17834693" z3="4.22528256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02450744" y3="0.9746467" z3="2.33998847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79421636" y3="0.46969426" z3="-4.28502572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77581791" y3="-0.4966887" z3="-4.46036709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.43106025" y3="-1.68925858" z3="-5.08564186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14598936" y3="-1.92229127" z3="-5.56590972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82864417" y3="-0.95277765" z3="-5.36832493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03652102" y3="1.39375765" z3="-3.75375951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79362548" y3="-0.34894681" z3="-4.09839186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44497599" y3="-2.73694807" z3="-5.22393419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08175587" y3="-2.86324199" z3="-6.06672914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.84944117" y3="-1.14027012" z3="-5.70539182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35558516" y3="-1.88414546" z3="5.04820521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31560116" y3="-3.72292973" z3="3.94314758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22473299" y3="-3.63914764" z3="-6.00338916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44579125" y3="-2.64983384" z3="-4.54042805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07299366" y3="1.16077169" z3="-1.48990606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11391977" y3="1.54950447" z3="-2.47007603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44240868" y3="1.48763943" z3="-1.68673121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8547115" y3="2.15068885" z3="-2.81661811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16729195" y3="1.19007285" z3="-0.92274493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91177474" y3="2.39174819" z3="-2.95984276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57646257" y3="2.21601232" z3="-3.63881236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90884572" y3="2.50807814" z3="-3.80724986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85647518" y3="2.48771602" z3="-4.41426203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24206987" y3="3.0142055" z3="-4.71762455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40882311" y3="3.1520454" z3="-3.33736346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29487157" y3="3.56493877" z3="-4.12635678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21810591" y3="4.16270268" z3="-2.74548818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97033766" y3="5.49563864" z3="-2.97260634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04551119" y3="3.87372763" z3="-2.09552002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60841393" y3="6.25099452" z3="-2.50517575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07313156" y3="4.95092123" z3="-4.35543647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89536385" y3="5.89935281" z3="-3.79959345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22288746" y3="5.24882075" z3="-4.97681277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71371007" y3="6.96259094" z3="-3.9799172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48231858" y3="-2.20678763" z3="-0.29089367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45262354" y3="-2.99749213" z3="-1.05964973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00796244" y3="-2.59192685" z3="0.59755824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09996438" y3="-1.38753955" z3="-0.70562006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.183114" y3="-1.4268132" z3="-1.1453782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32124881" y3="-0.38528231" z3="-1.4901352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10632444" y3="-1.55151" z3="-0.9422332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42493427" y3="-2.07902403" z3="-1.99788999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0518,-.1915;7.385,.1668,.4191;6.6466,.4413,-.3405;4.7303,1.2357,-2.2629;4.3884,.4358,-1.1846;2.7305,.8464,-3.6632;3.6369,1.7482,-3.137;1.3866,2.5923,-4.6203;1.5637,1.2513,-4.3769;.5084,2.9282,-5.1803;2.9244,-.4839,-3.4413;3.0977,.0481,-1.0021;2.4004,-1.0961,-2.0007;.9289,-.9658,-1.8271;3.103,-2.4204,-1.8461;-.141,-3.6156,.6731;-.0115,-5.2482,-4.7451;-.2404,-4.9925,-3.7069;-.8393,-4.3067,-1.0866;.7836,-4.584,-2.8545;-1.5563,-5.0845,-3.2492;-1.8566,-4.7363,-1.9347;.4962,-4.2559,-1.5279;1.8164,-4.5017,-3.2011;-2.3547,-5.3985,-3.925;-2.8932,-4.7761,-1.5914;-1.0294,-3.8602,.2348;-2.1699,-3.6514,.8806;-3.0565,-4.1162,.4467;-2.1645,-3.5185,2.3478;-2.2215,-3.3401,5.146;-3.3594,-3.7299,3.0513;-.9981,-3.2234,3.0693;-1.0239,-3.1348,4.4581;-3.3871,-3.6428,4.4404;-4.2736,-3.9729,2.5031;-.0397,-3.0838,2.5643;-.0954,-2.9251,4.9967;-4.3241,-3.8191,4.9757;-2.2412,-3.2789,6.2377;1.4157,-3.891,-.6235;2.1752,-3.3875,-1.076;.5217,.2471,-4.7121;-3.0844,-1.7266,.0259;-2.9081,-.977,1.1882;-1.847,-.3247,1.5198;-.3769,.5562,1.2202;-.4591,1.4527,-.4077;.9808,-.6935,1.4001;-.3704,1.7516,2.6624;-3.8808,-.9708,2.0884;-3.6503,-.3592,3.3478;-.2156,.7626,-1.2337;.3103,2.2474,-.4036;-1.4417,1.9302,-.5698;1.0118,-1.0561,2.4408;1.9517,-.2277,1.1599;.8583,-1.5371,.7014;-.4233,1.2143,3.6259;.5624,2.3446,2.659;-1.2166,2.4595,2.6111;-2.7865,-.8154,3.8573;-4.5637,-.5357,3.9313;-3.4814,.7236,3.2294;4.8383,-.7036,.9917;4.4121,-2.0305,.8538;3.7594,-2.6758,1.8968;3.5498,-1.9811,3.0842;4.0284,-.6889,3.2788;4.681,-.0571,2.2248;4.5167,-2.5288,-.1119;3.363,-3.6844,1.7739;2.6884,-2.5801,4.1086;3.8464,-.1783,4.2253;5.0245,.9746,2.34;-.7942,.4697,-4.285;-1.7758,-.4967,-4.4604;-1.4311,-1.6893,-5.0856;-.146,-1.9223,-5.5659;.8286,-.9528,-5.3683;-1.0365,1.3938,-3.7538;-2.7936,-.3489,-4.0984;-2.445,-2.7369,-5.2239;.0818,-2.8632,-6.0667;1.8494,-1.1403,-5.7054;2.3556,-1.8841,5.0482;2.3156,-3.7229,3.9431;-2.2247,-3.6391,-6.0034;-3.4458,-2.6498,-4.5404;7.073,1.1608,-1.4899;6.1139,1.5495,-2.4701;8.4424,1.4876,-1.6867;8.8547,2.1507,-2.8166;9.1673,1.1901,-.9227;9.9118,2.3917,-2.9598;6.5765,2.216,-3.6388;7.9088,2.5081,-3.8072;5.8565,2.4877,-4.4143;8.2421,3.0142,-4.7176;3.4088,3.152,-3.3374;2.2949,3.5649,-4.1264;4.2181,4.1627,-2.7455;3.9703,5.4956,-2.9726;5.0455,3.8737,-2.0955;4.6084,6.251,-2.5052;2.0731,4.9509,-4.3554;2.8954,5.8994,-3.7996;1.2229,5.2488,-4.9768;2.7137,6.9626,-3.9799;-4.4823,-2.2068,-.2909;-4.4526,-2.9975,-1.0596;-5.008,-2.5919,.5976;-5.1,-1.3875,-.7056;-2.1831,-1.4268,-1.1454;-2.3212,-.3853,-1.4901;-1.1063,-1.5515,-.9422;-2.4249,-2.079,-1.9979;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650428302595</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000654666927 0.000093874280 0.021497476470 0.005359121890</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030804022 -0.000098886 0.000006529 0.000119581 0.000216384 0.000247012 0.000287989 0.000392970 0.000580648 0.000809069 0.000867606 0.000916579 0.001039073 0.001204710 0.001449621 0.001484006 0.001570673 0.001674491 0.001725386 0.001920483 0.001963435 0.002203588 0.002305399 0.002533172 0.002681359 0.002979811 0.003012559 0.003078709 0.003675814 0.003937174 0.004445200 0.004668935 0.004780560 0.005108318 0.005943266 0.006054288 0.006284087 0.006677099 0.006831761 0.007478257 0.007956480 0.008241677 0.008404189 0.009427532 0.009442108 0.009979406 0.010102713 0.011260935 0.011903366 0.012181076 0.012973635 0.013099306 0.014332301 0.014896619 0.015264088 0.015780920 0.015934715 0.016351383 0.016800667 0.017345145 0.018160672 0.018691763 0.018906438 0.019691436 0.020133771 0.020557562 0.021160638 0.021388658 0.021554830 0.023041234 0.023438814 0.026659999 0.026905891 0.028155835 0.028390119 0.029654820 0.030572897 0.031656157 0.033255444 0.033753543 0.034166310 0.035710929 0.036379469 0.037244533 0.038443607 0.039630284 0.040205709 0.041141898 0.042599796 0.044713652 0.045815906 0.047257071 0.048098037 0.049303750 0.050569536 0.051087180 0.051315641 0.051848959 0.052512797 0.052832162 0.052970861 0.053280537 0.054917493 0.055010873 0.056286228 0.056468680 0.056620047 0.057078915 0.057250193 0.059254412 0.060659565 0.061090822 0.061936960 0.062421318 0.063450780 0.064545425 0.065332043 0.066199722 0.066641283 0.068612141 0.069337898 0.070292573 0.072903879 0.074481302 0.074805035 0.076536355 0.079347455 0.084583549 0.087009761 0.087311374 0.087782680 0.089896071 0.090737407 0.091730253 0.094354893 0.095782583 0.096004515 0.096580279 0.097879304 0.098850405 0.100250056 0.100918135 0.102485582 0.103256223 0.103723062 0.104480586 0.104658854 0.105485385 0.106376208 0.107125443 0.108258819 0.110192615 0.111226574 0.112603999 0.113579543 0.115160255 0.116298815 0.116888515 0.118789569 0.121400494 0.122564247 0.123893039 0.125574985 0.126347506 0.126464184 0.126828637 0.127968316 0.132211534 0.135178825 0.135961745 0.143238912 0.144136806 0.147233508 0.147576495 0.149831210 0.151046614 0.154675954 0.154779597 0.156766648 0.161334306 0.162058411 0.173899992 0.174495302 0.182314155 0.185761332 0.186609481 0.189729101 0.190472141 0.194531588 0.195970847 0.199104852 0.200459799 0.205300738 0.207220660 0.207603826 0.210307412 0.216876898 0.217523592 0.218018015 0.220893319 0.221318344 0.225454954 0.226810534 0.232436217 0.235268081 0.235786260 0.236132969 0.244812721 0.256145722 0.257401876 0.264036772 0.269965787 0.280790887 0.283986940 0.286420406 0.291988671 0.297091210 0.304626819 0.306050106 0.307398733 0.314735239 0.316854413 0.317491838 0.322273596 0.330192393 0.333274903 0.351844703 0.353064795 0.355607764 0.356108091 0.360115209 0.363200484 0.364626775 0.383919031 0.386075825 0.392333525 0.410706451 0.426164209 0.431325275 0.462537841 0.469603013 0.479244963 0.484637739 0.484719590 0.487497017 0.491518467 0.509955100 0.515444392 0.535235196 0.569578661 0.575437133 0.591161338 0.594341338 0.607532648 0.608512380 0.645109325 0.648034731 0.649916152 0.674587956 0.678432225 0.688326638 0.693533407 0.694262417 0.700433885 0.705541827 0.718561033 0.742342453 0.751465254 0.759485914 0.772223670 0.774855914 0.779835580 0.811194491 0.816774502 0.820542142 0.823323451 0.823806772 0.832518023 0.835122741 0.838330287 0.842821074 0.845973717 0.847874130 0.850327753 0.859917191 0.866030148 0.869263806 0.874984493 0.886669392 0.889336494 0.890010215 0.900915966 0.901179405 0.904463440 0.924286590 0.928344019 0.936920969 0.938305960 0.966483247 0.977920306 0.987594775 1.002051859 1.020458392 1.028861813 1.042879610 1.052990948 1.059216065 1.069461646 1.087058631 1.089206169 1.105678377 1.112111267 1.113140846 1.129904155 1.136592702 1.141427671 1.145755453 1.176914244 1.179245269 1.181985022 1.187749981 1.191701355 1.198867832 1.225303652 1.229097903 1.275123736 1.303135288 1.321481061 1.328529500 1.333541536 1.336739722 1.337706243 1.341910065 1.344803632 1.345543839 1.360003030 1.379784461 1.383557219 1.386329657 1.404272544 1.421406054 1.430497178 1.551525572 1.687361183 1.777077766</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">337</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33623528" y3="0.05714431" z3="-0.18779662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38093526" y3="0.17557684" z3="0.42528021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64308143" y3="0.44735329" z3="-0.33588009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72814289" y3="1.23683518" z3="-2.26163281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38606818" y3="0.43846769" z3="-1.18247368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72980457" y3="0.84403115" z3="-3.66310048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6353173" y3="1.74715159" z3="-3.13791121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38663409" y3="2.58741656" z3="-4.62562934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56338784" y3="1.2473332" z3="-4.37817713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50892176" y3="2.92193657" z3="-5.18734825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92449405" y3="-0.48589666" z3="-3.43917106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09559727" y3="0.04932389" z3="-1.00059983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39960798" y3="-1.09650928" z3="-1.99830279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92785648" y3="-0.9663697" z3="-1.82640088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.1023898" y3="-2.42034483" z3="-1.84107042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14394821" y3="-3.61698435" z3="0.6699413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01557229" y3="-5.24538609" z3="-4.74899676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24435503" y3="-4.9899819" z3="-3.7107827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84272624" y3="-4.30566529" z3="-1.09003027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78020207" y3="-4.58369177" z3="-2.85768526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56045338" y3="-5.08042874" z3="-3.25349112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.86052416" y3="-4.73285547" z3="-1.93870606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49305495" y3="-4.25639703" z3="-1.5309581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81326851" y3="-4.50290066" z3="-3.20402379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35950779" y3="-5.39226126" z3="-3.92982051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89717505" y3="-4.77174559" z3="-1.59579688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03213068" y3="-3.86069417" z3="0.23191139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17206073" y3="-3.65035194" z3="0.87822314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05970331" y3="-4.11220756" z3="0.44360225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16607699" y3="-3.5197794" z3="2.34564566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22235035" y3="-3.34486839" z3="5.14420591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36143557" y3="-3.72836434" z3="3.04909634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99856351" y3="-3.22989787" z3="3.06761676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02410152" y3="-3.14279701" z3="4.45651598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38855358" y3="-3.6432735" z3="4.4383267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27714601" y3="-3.96654867" z3="2.50050775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03941645" y3="-3.09349581" z3="2.56290343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09460626" y3="-2.93701343" z3="4.99526452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.3261079" y3="-3.81716919" z3="4.97348406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24165603" y3="-3.28511585" z3="6.23598278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41273893" y3="-3.89401149" z3="-0.62571438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17245272" y3="-3.38930957" z3="-1.0762704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52148009" y3="0.24244326" z3="-4.71316357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08279805" y3="-1.72155815" z3="0.02720056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90587995" y3="-0.97382763" z3="1.19046059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84473963" y3="-0.32225471" z3="1.52330691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37001629" y3="0.55124341" z3="1.22481004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44992218" y3="1.45452114" z3="-0.39933311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98164676" y3="-0.70550476" z3="1.39865175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35395603" y3="1.7405775" z3="2.67228319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87869232" y3="-0.96811818" z3="2.0906241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64756458" y3="-0.35867675" z3="3.35092029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.212047" y3="0.76634493" z3="-1.22850636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32441728" y3="2.24445974" z3="-0.3935806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42998049" y3="1.93843531" z3="-0.55780881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01059371" y3="-1.07355414" z3="2.43787692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95453348" y3="-0.24180354" z3="1.16170191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85674725" y3="-1.54494056" z3="0.69586281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40964168" y3="1.19925523" z3="3.63339303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58308872" y3="2.32673562" z3="2.67043796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19511059" y3="2.4550243" z3="2.62532459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78380933" y3="-0.81613519" z3="3.85946993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56082346" y3="-0.53581525" z3="3.93435739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47819896" y3="0.72425116" z3="3.23432554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83571176" y3="-0.6984189" z3="0.99547881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41434478" y3="-2.02735678" z3="0.85867411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76351816" y3="-2.67367811" z3="1.90226887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55024946" y3="-1.97798151" z3="3.08907139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02316526" y3="-0.6833087" z3="3.28208638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67449107" y3="-0.05073429" z3="2.22785327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52406276" y3="-2.52776015" z3="-0.10421483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37182484" y3="-3.68445663" z3="1.78079746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68936464" y3="-2.57861178" z3="4.11299612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83600544" y3="-0.17115096" z3="4.22597827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01320152" y3="0.98269555" z3="2.34138177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79468802" y3="0.46663335" z3="-4.28739867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77716525" y3="-0.49876522" z3="-4.46414805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4329422" y3="-1.69161194" z3="-5.08906243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14730344" y3="-1.92641061" z3="-5.56640601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82825168" y3="-0.95822923" z3="-5.36758847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0366053" y3="1.39133536" z3="-3.75736102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79526772" y3="-0.34979587" z3="-4.10332566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44787664" y3="-2.73758999" z3="-5.22962696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08022764" y3="-2.86772934" z3="-6.06716052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8494906" y3="-1.14704852" z3="-5.70268122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34995791" y3="-1.8814233" z3="5.0491836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.32300708" y3="-3.72399984" z3="3.94993617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2292915" y3="-3.63644021" z3="-6.01325235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4475646" y3="-2.65281621" z3="-4.54432958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.06991107" y3="1.16611948" z3="-1.48558222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11161849" y3="1.55214331" z3="-2.46752544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43925912" y3="1.49553306" z3="-1.68077543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85197038" y3="2.15729377" z3="-2.8110312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16360564" y3="1.20020471" z3="-0.91534755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90875001" y3="2.39953529" z3="-2.95313746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57496634" y3="2.21837398" z3="-3.63641803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90687962" y3="2.51179939" z3="-3.80346394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85578865" y3="2.48826273" z3="-4.4131757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24053697" y3="3.01820262" z3="-4.71381826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40717086" y3="3.15055377" z3="-3.34195538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29449412" y3="3.56124048" z3="-4.13385093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21529374" y3="4.16334407" z3="-2.75161872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96859024" y3="5.49545059" z3="-2.9840977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04148703" y3="3.87651145" z3="-2.09920367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60626577" y3="6.25222287" z3="-2.51835919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07351512" y3="4.94643369" z3="-4.36814313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89525365" y3="5.89663742" z3="-3.81441812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22419551" y3="5.24246195" z3="-4.99171104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71450107" y3="6.95923203" z3="-3.99907706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48128695" y3="-2.19897402" z3="-0.29055637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45313468" y3="-2.98931105" z3="-1.06007366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00819853" y3="-2.58400054" z3="0.59746882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09682538" y3="-1.37798779" z3="-0.70453015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18108796" y3="-1.42168054" z3="-1.14372187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31911795" y3="-0.38067676" z3="-1.48894218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10410329" y3="-1.54707416" z3="-0.94109077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42315232" y3="-2.07388767" z3="-1.99638577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3362,.0571,-.1878;7.3809,.1756,.4253;6.6431,.4474,-.3359;4.7281,1.2368,-2.2616;4.3861,.4385,-1.1825;2.7298,.844,-3.6631;3.6353,1.7472,-3.1379;1.3866,2.5874,-4.6256;1.5634,1.2473,-4.3782;.5089,2.9219,-5.1873;2.9245,-.4859,-3.4392;3.0956,.0493,-1.0006;2.3996,-1.0965,-1.9983;.9279,-.9664,-1.8264;3.1024,-2.4203,-1.8411;-.1439,-3.617,.6699;-.0156,-5.2454,-4.749;-.2444,-4.99,-3.7108;-.8427,-4.3057,-1.09;.7802,-4.5837,-2.8577;-1.5605,-5.0804,-3.2535;-1.8605,-4.7329,-1.9387;.4931,-4.2564,-1.531;1.8133,-4.5029,-3.204;-2.3595,-5.3923,-3.9298;-2.8972,-4.7717,-1.5958;-1.0321,-3.8607,.2319;-2.1721,-3.6504,.8782;-3.0597,-4.1122,.4436;-2.1661,-3.5198,2.3456;-2.2224,-3.3449,5.1442;-3.3614,-3.7284,3.0491;-.9986,-3.2299,3.0676;-1.0241,-3.1428,4.4565;-3.3886,-3.6433,4.4383;-4.2771,-3.9665,2.5005;-.0394,-3.0935,2.5629;-.0946,-2.937,4.9953;-4.3261,-3.8172,4.9735;-2.2417,-3.2851,6.236;1.4127,-3.894,-.6257;2.1725,-3.3893,-1.0763;.5215,.2424,-4.7132;-3.0828,-1.7216,.0272;-2.9059,-.9738,1.1905;-1.8447,-.3223,1.5233;-.37,.5512,1.2248;-.4499,1.4545,-.3993;.9816,-.7055,1.3987;-.354,1.7406,2.6723;-3.8787,-.9681,2.0906;-3.6476,-.3587,3.3509;-.212,.7663,-1.2285;.3244,2.2445,-.3936;-1.43,1.9384,-.5578;1.0106,-1.0736,2.4379;1.9545,-.2418,1.1617;.8567,-1.5449,.6959;-.4096,1.1993,3.6334;.5831,2.3267,2.6704;-1.1951,2.455,2.6253;-2.7838,-.8161,3.8595;-4.5608,-.5358,3.9344;-3.4782,.7243,3.2343;4.8357,-.6984,.9955;4.4143,-2.0274,.8587;3.7635,-2.6737,1.9023;3.5502,-1.978,3.0891;4.0232,-.6833,3.2821;4.6745,-.0507,2.2279;4.5241,-2.5278,-.1042;3.3718,-3.6845,1.7808;2.6894,-2.5786,4.113;3.836,-.1712,4.226;5.0132,.9827,2.3414;-.7947,.4666,-4.2874;-1.7772,-.4988,-4.4641;-1.4329,-1.6916,-5.0891;-.1473,-1.9264,-5.5664;.8283,-.9582,-5.3676;-1.0366,1.3913,-3.7574;-2.7953,-.3498,-4.1033;-2.4479,-2.7376,-5.2296;.0802,-2.8677,-6.0672;1.8495,-1.147,-5.7027;2.35,-1.8814,5.0492;2.323,-3.724,3.9499;-2.2293,-3.6364,-6.0133;-3.4476,-2.6528,-4.5443;7.0699,1.1661,-1.4856;6.1116,1.5521,-2.4675;8.4393,1.4955,-1.6808;8.852,2.1573,-2.811;9.1636,1.2002,-.9153;9.9088,2.3995,-2.9531;6.575,2.2184,-3.6364;7.9069,2.5118,-3.8035;5.8558,2.4883,-4.4132;8.2405,3.0182,-4.7138;3.4072,3.1506,-3.342;2.2945,3.5612,-4.1339;4.2153,4.1633,-2.7516;3.9686,5.4955,-2.9841;5.0415,3.8765,-2.0992;4.6063,6.2522,-2.5184;2.0735,4.9464,-4.3681;2.8953,5.8966,-3.8144;1.2242,5.2425,-4.9917;2.7145,6.9592,-3.9991;-4.4813,-2.199,-.2906;-4.4531,-2.9893,-1.0601;-5.0082,-2.584,.5975;-5.0968,-1.378,-.7045;-2.1811,-1.4217,-1.1437;-2.3191,-.3807,-1.4889;-1.1041,-1.5471,-.9411;-2.4232,-2.0739,-1.9964;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650424510228</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001104125102 0.000169571840 0.020838445767 0.005302266382</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030803383 -0.000227665 0.000006953 0.000124007 0.000189680 0.000252640 0.000290302 0.000410229 0.000592934 0.000810238 0.000869229 0.000917603 0.001039742 0.001204017 0.001454578 0.001482620 0.001573443 0.001669520 0.001724458 0.001919380 0.001964387 0.002195750 0.002303662 0.002532672 0.002681144 0.002975723 0.003012834 0.003079074 0.003679423 0.003957771 0.004443617 0.004668369 0.004781363 0.005109059 0.005928963 0.006052958 0.006282953 0.006676326 0.006826737 0.007469985 0.007949348 0.008242878 0.008404758 0.009426731 0.009438492 0.009975300 0.010102813 0.011262077 0.011899554 0.012173556 0.012966165 0.013095823 0.014320620 0.014897694 0.015233719 0.015768469 0.015923469 0.016332138 0.016800788 0.017331529 0.018149265 0.018664811 0.018909869 0.019696432 0.020131974 0.020552633 0.021153156 0.021387290 0.021544753 0.023041488 0.023433581 0.026667664 0.026905647 0.028160606 0.028389913 0.029656814 0.030575525 0.031655480 0.033254351 0.033753610 0.034164324 0.035694696 0.036301258 0.037243611 0.038416041 0.039629089 0.040205486 0.041141772 0.042599968 0.044712799 0.045816150 0.047259771 0.048098410 0.049307745 0.050569543 0.051086961 0.051315722 0.051849437 0.052513742 0.052833231 0.052971131 0.053280671 0.054917956 0.055010949 0.056288001 0.056474026 0.056620662 0.057079116 0.057250507 0.059255908 0.060659689 0.061090831 0.061937226 0.062421318 0.063451146 0.064546045 0.065331806 0.066198976 0.066644134 0.068614493 0.069339002 0.070292317 0.072910521 0.074475773 0.074804856 0.076536952 0.079348754 0.084583611 0.087009620 0.087311146 0.087785047 0.089903548 0.090742686 0.091731477 0.094357202 0.095851092 0.096045485 0.096604490 0.097879602 0.098849936 0.100251437 0.100932384 0.102486460 0.103261617 0.103726802 0.104480393 0.104661887 0.105485287 0.106374799 0.107125656 0.108257277 0.110196534 0.111228089 0.112605611 0.113580016 0.115159853 0.116298796 0.116889125 0.118789993 0.121400667 0.122564206 0.123898382 0.125577836 0.126351148 0.126468363 0.126828443 0.127970896 0.132212419 0.135178650 0.135962234 0.143243172 0.144136595 0.147233392 0.147571519 0.149828419 0.150993274 0.154667985 0.154778072 0.156767620 0.161336933 0.162059460 0.173909562 0.174498301 0.182314246 0.185781383 0.186609087 0.189729025 0.190473039 0.194530823 0.195981428 0.199114842 0.200459958 0.205299767 0.207222438 0.207605296 0.210307509 0.216876849 0.217524964 0.218018246 0.220893729 0.221336695 0.225456332 0.226811053 0.232436364 0.235268448 0.235789089 0.236133000 0.244813339 0.256145727 0.257402041 0.264037338 0.269964961 0.280790946 0.283988338 0.286420657 0.291988214 0.297091231 0.304629314 0.306050108 0.307399078 0.314736344 0.316854451 0.317494225 0.322273616 0.330190013 0.333279052 0.351845213 0.353064764 0.355608732 0.356112321 0.360115959 0.363201969 0.364627146 0.383903379 0.386076132 0.392334457 0.410707436 0.426164325 0.431325380 0.462538281 0.469598217 0.479246182 0.484638825 0.484719769 0.487493022 0.491519554 0.509955799 0.515433597 0.535222614 0.569579219 0.575437863 0.591139795 0.594344327 0.607534566 0.608512375 0.645110105 0.648041574 0.649916134 0.674593565 0.678426248 0.688329159 0.693532111 0.694265696 0.700432731 0.705604747 0.718562260 0.742343125 0.751465374 0.759485975 0.772224016 0.774857827 0.779835591 0.811197399 0.816774161 0.820541899 0.823322785 0.823808186 0.832520352 0.835127927 0.838331892 0.842820934 0.845974312 0.847881365 0.850335361 0.859919850 0.866031486 0.869283004 0.875002259 0.886669816 0.889338458 0.890010749 0.900915753 0.901181357 0.904476042 0.924288197 0.928344995 0.936922121 0.938307346 0.966491802 0.977973558 0.987619528 1.002060794 1.020464188 1.028861863 1.042888388 1.052991210 1.059217385 1.069476907 1.087058704 1.089206838 1.105683269 1.112115242 1.113144287 1.129909468 1.136593117 1.141431912 1.145756278 1.176914480 1.179245801 1.181991341 1.187752405 1.191701640 1.198871298 1.225321644 1.229098286 1.275101796 1.303135996 1.321483119 1.328530163 1.333542552 1.336739058 1.337678476 1.341895473 1.344803565 1.345547068 1.360004116 1.379784608 1.383557995 1.386331512 1.404093425 1.421407216 1.430465856 1.551525433 1.687371133 1.777077775</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">338</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.3408231" y3="0.05543971" z3="-0.19302491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38721218" y3="0.16911187" z3="0.41585132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64825147" y3="0.44331609" z3="-0.34337167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73101203" y3="1.23813669" z3="-2.26452987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38954741" y3="0.43925959" z3="-1.18563854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73176305" y3="0.84711172" z3="-3.66463369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63729502" y3="1.74972801" z3="-3.13882934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38593177" y3="2.59166728" z3="-4.62134347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56466059" y3="1.25099297" z3="-4.37820613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.5071013" y3="2.92681651" z3="-5.1809346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92647821" y3="-0.48298175" z3="-3.44142889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09880903" y3="0.0515267" z3="-1.00248388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40078992" y3="-1.09296693" z3="-2.00045347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92928647" y3="-0.96042311" z3="-1.82849214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10159781" y3="-2.41785678" z3="-1.84322269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14504366" y3="-3.61775401" z3="0.67773318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01262305" y3="-5.24324864" z3="-4.74287623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24172167" y3="-4.98944359" z3="-3.70435239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84127906" y3="-4.30814192" z3="-1.08303208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78166522" y3="-4.57936259" z3="-2.85179192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55718142" y3="-5.08539923" z3="-3.24622601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85780239" y3="-4.73949267" z3="-1.93115823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49395232" y3="-4.2534443" z3="-1.5247939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81413015" y3="-4.49392659" z3="-3.19877819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35528127" y3="-5.4002177" z3="-3.92224703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8940367" y3="-4.78292747" z3="-1.58746243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03234843" y3="-3.86308918" z3="0.23869696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17345601" y3="-3.65170002" z3="0.88277023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0603499" y3="-4.11468375" z3="0.44776488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16976105" y3="-3.51802907" z3="2.34989867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.23005207" y3="-3.33539473" z3="5.14784733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36626357" y3="-3.7243634" z3="3.05210426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00326163" y3="-3.22667597" z3="3.07277146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.03071986" y3="-3.13574195" z3="4.46137286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39537579" y3="-3.63541466" z3="4.44104571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28119401" y3="-3.9637597" z3="2.50280766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0432475" y3="-3.09240427" z3="2.56921356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.10165829" y3="-2.92902134" z3="5.00052699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33374521" y3="-3.80757502" z3="4.97529933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.25106775" y3="-3.27252504" z3="6.23942391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41279788" y3="-3.88688451" z3="-0.62035712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17222818" y3="-3.38338093" z3="-1.07276409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52404173" y3="0.24526894" z3="-4.71461688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08252867" y3="-1.72526074" z3="0.02625549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9089513" y3="-0.97532979" z3="1.18868017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84849604" y3="-0.32385886" z3="1.52391127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37288057" y3="0.54846282" z3="1.22519508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45500699" y3="1.45431399" z3="-0.39745611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97913367" y3="-0.70852373" z3="1.39493706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35452158" y3="1.73469505" z3="2.67508183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8847993" y3="-0.96727797" z3="2.0855097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65840118" y3="-0.35389415" z3="3.34474055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21581983" y3="0.76768419" z3="-1.22752677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31786414" y3="2.24562202" z3="-0.39089099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43595187" y3="1.93660581" z3="-0.55512228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01078236" y3="-1.07670812" z3="2.4340403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95136307" y3="-0.24453891" z3="1.15580969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85300926" y3="-1.54800841" z3="0.69233845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40676019" y3="1.19100672" z3="3.63505775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58166634" y3="2.3222023" z3="2.67203268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19687556" y3="2.4479438" z3="2.63208399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79742305" y3="-0.81062557" z3="3.85860275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57443271" y3="-0.52794489" z3="3.92473225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48728807" y3="0.72841289" z3="3.22520033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.84000227" y3="-0.70017753" z3="0.99012377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41801985" y3="-2.02878808" z3="0.85272725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76482029" y3="-2.67461423" z3="1.89514191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55056818" y3="-1.97901033" z3="3.08170269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02458484" y3="-0.68487683" z3="3.27561225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67761257" y3="-0.0525272" z3="2.22229449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52826147" y3="-2.52894365" z3="-0.11033338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37188495" y3="-3.68473721" z3="1.77263027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68748406" y3="-2.5787946" z3="4.10433051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83683413" y3="-0.17288185" z3="4.21950907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01678077" y3="0.98069971" z3="2.33637459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79169172" y3="0.46536639" z3="-4.28554589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77211282" y3="-0.50210056" z3="-4.46202658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.4263582" y3="-1.69328218" z3="-5.08941387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14132555" y3="-1.92381232" z3="-5.57059808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83208698" y3="-0.95317112" z3="-5.37265453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03456254" y3="1.38811407" z3="-3.75248455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78963593" y3="-0.35636864" z3="-4.09841856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43912229" y3="-2.74194415" z3="-5.22753969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08754287" y3="-2.86367124" z3="-6.0735103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85288959" y3="-1.13859542" z3="-5.71104005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35447581" y3="-1.88417568" z3="5.04464196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31319073" y3="-3.72090119" z3="3.93634772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21651111" y3="-3.64592102" z3="-6.00436452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44158673" y3="-2.65387316" z3="-4.54641134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07411274" y3="1.16256387" z3="-1.49317319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11445291" y3="1.55185267" z3="-2.47253314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44370738" y3="1.48916111" z3="-1.69120005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85521857" y3="2.15164472" z3="-2.82150145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16928028" y3="1.19111702" z3="-0.92799789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91225653" y3="2.39164359" z3="-2.96584331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57634745" y3="2.21911371" z3="-3.64134042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90855708" y3="2.50996675" z3="-3.81107003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85585219" y3="2.49171589" z3="-4.41596059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24118605" y3="3.01701361" z3="-4.72140968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40768087" y3="3.15336012" z3="-3.33886952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29295548" y3="3.56517533" z3="-4.12728808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21575227" y3="4.16498945" z3="-2.74656671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96606264" y3="5.4976181" z3="-2.97279037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04396298" y3="3.87670385" z3="-2.09730225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.603352" y3="6.25356108" z3="-2.50527631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06904227" y3="4.95098813" z3="-4.35523885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89002351" y3="5.90029427" z3="-3.79889862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21792633" y3="5.24820231" z3="-4.9757803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70661973" y3="6.96336398" z3="-3.97823861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48013588" y3="-2.20332256" z3="-0.29461455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44961477" y3="-2.99482318" z3="-1.06274546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00937794" y3="-2.58695115" z3="0.59257095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09476646" y3="-1.38317286" z3="-0.71171725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17814265" y3="-1.42649807" z3="-1.14294631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31521204" y3="-0.38564204" z3="-1.48904325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10164574" y3="-1.55184877" z3="-0.93801054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41850942" y3="-2.07926018" z3="-1.99564026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3408,.0554,-.193;7.3872,.1691,.4159;6.6483,.4433,-.3434;4.731,1.2381,-2.2645;4.3895,.4393,-1.1856;2.7318,.8471,-3.6646;3.6373,1.7497,-3.1388;1.3859,2.5917,-4.6213;1.5647,1.251,-4.3782;.5071,2.9268,-5.1809;2.9265,-.483,-3.4414;3.0988,.0515,-1.0025;2.4008,-1.093,-2.0005;.9293,-.9604,-1.8285;3.1016,-2.4179,-1.8432;-.145,-3.6178,.6777;-.0126,-5.2432,-4.7429;-.2417,-4.9894,-3.7044;-.8413,-4.3081,-1.083;.7817,-4.5794,-2.8518;-1.5572,-5.0854,-3.2462;-1.8578,-4.7395,-1.9312;.494,-4.2534,-1.5248;1.8141,-4.4939,-3.1988;-2.3553,-5.4002,-3.9222;-2.894,-4.7829,-1.5875;-1.0323,-3.8631,.2387;-2.1735,-3.6517,.8828;-3.0603,-4.1147,.4478;-2.1698,-3.518,2.3499;-2.2301,-3.3354,5.1478;-3.3663,-3.7244,3.0521;-1.0033,-3.2267,3.0728;-1.0307,-3.1357,4.4614;-3.3954,-3.6354,4.441;-4.2812,-3.9638,2.5028;-.0432,-3.0924,2.5692;-.1017,-2.929,5.0005;-4.3337,-3.8076,4.9753;-2.2511,-3.2725,6.2394;1.4128,-3.8869,-.6204;2.1722,-3.3834,-1.0728;.524,.2453,-4.7146;-3.0825,-1.7253,.0263;-2.909,-.9753,1.1887;-1.8485,-.3239,1.5239;-.3729,.5485,1.2252;-.455,1.4543,-.3975;.9791,-.7085,1.3949;-.3545,1.7347,2.6751;-3.8848,-.9673,2.0855;-3.6584,-.3539,3.3447;-.2158,.7677,-1.2275;.3179,2.2456,-.3909;-1.436,1.9366,-.5551;1.0108,-1.0767,2.434;1.9514,-.2445,1.1558;.853,-1.548,.6923;-.4068,1.191,3.6351;.5817,2.3222,2.672;-1.1969,2.4479,2.6321;-2.7974,-.8106,3.8586;-4.5744,-.5279,3.9247;-3.4873,.7284,3.2252;4.84,-.7002,.9901;4.418,-2.0288,.8527;3.7648,-2.6746,1.8951;3.5506,-1.979,3.0817;4.0246,-.6849,3.2756;4.6776,-.0525,2.2223;4.5283,-2.5289,-.1103;3.3719,-3.6847,1.7726;2.6875,-2.5788,4.1043;3.8368,-.1729,4.2195;5.0168,.9807,2.3364;-.7917,.4654,-4.2855;-1.7721,-.5021,-4.462;-1.4264,-1.6933,-5.0894;-.1413,-1.9238,-5.5706;.8321,-.9532,-5.3727;-1.0346,1.3881,-3.7525;-2.7896,-.3564,-4.0984;-2.4391,-2.7419,-5.2275;.0875,-2.8637,-6.0735;1.8529,-1.1386,-5.711;2.3545,-1.8842,5.0446;2.3132,-3.7209,3.9363;-2.2165,-3.6459,-6.0044;-3.4416,-2.6539,-4.5464;7.0741,1.1626,-1.4932;6.1145,1.5519,-2.4725;8.4437,1.4892,-1.6912;8.8552,2.1516,-2.8215;9.1693,1.1911,-.928;9.9123,2.3916,-2.9658;6.5763,2.2191,-3.6413;7.9086,2.51,-3.8111;5.8559,2.4917,-4.416;8.2412,3.017,-4.7214;3.4077,3.1534,-3.3389;2.293,3.5652,-4.1273;4.2158,4.165,-2.7466;3.9661,5.4976,-2.9728;5.044,3.8767,-2.0973;4.6034,6.2536,-2.5053;2.069,4.951,-4.3552;2.89,5.9003,-3.7989;1.2179,5.2482,-4.9758;2.7066,6.9634,-3.9782;-4.4801,-2.2033,-.2946;-4.4496,-2.9948,-1.0627;-5.0094,-2.587,.5926;-5.0948,-1.3832,-.7117;-2.1781,-1.4265,-1.1429;-2.3152,-.3856,-1.489;-1.1016,-1.5518,-.938;-2.4185,-2.0793,-1.9956;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650427238706</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000846390116 0.000138575158 0.021010998329 0.005278729902</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030804957 -0.000050612 0.000108661 0.000153135 0.000185047 0.000246857 0.000394780 0.000530073 0.000703730 0.000815034 0.000860299 0.000917754 0.001071501 0.001201023 0.001449155 0.001477848 0.001581856 0.001654696 0.001724306 0.001921512 0.001974313 0.002184139 0.002290625 0.002530418 0.002681319 0.002956150 0.003002608 0.003079527 0.003678342 0.003950302 0.004439728 0.004663414 0.004777135 0.005108407 0.005890102 0.006048720 0.006270819 0.006668920 0.006812170 0.007446155 0.007933413 0.008245451 0.008401815 0.009414182 0.009432864 0.009947010 0.010102025 0.011262980 0.011868282 0.012127584 0.012918643 0.013081634 0.014271184 0.014878357 0.015146101 0.015727163 0.015894334 0.016291491 0.016797395 0.017277928 0.018114540 0.018596512 0.018915479 0.019702006 0.020112490 0.020514329 0.021126878 0.021385011 0.021527355 0.023045057 0.023418122 0.026672298 0.026906024 0.028171207 0.028393285 0.029661051 0.030579489 0.031654011 0.033253285 0.033754561 0.034159004 0.035589772 0.036067334 0.037239333 0.038329924 0.039627346 0.040207770 0.041142154 0.042600705 0.044711215 0.045819811 0.047259169 0.048101328 0.049313225 0.050570712 0.051086865 0.051315912 0.051851358 0.052515110 0.052835662 0.052971424 0.053280874 0.054918963 0.055012225 0.056293671 0.056486755 0.056622636 0.057078888 0.057251207 0.059257489 0.060659160 0.061092301 0.061938754 0.062420634 0.063451218 0.064546412 0.065334023 0.066200499 0.066646563 0.068619954 0.069343281 0.070292371 0.072919574 0.074456517 0.074804664 0.076537617 0.079351688 0.084584804 0.087010024 0.087313580 0.087786499 0.089910966 0.090739111 0.091727845 0.094360685 0.095878948 0.096133914 0.096651929 0.097879989 0.098851579 0.100253926 0.100956394 0.102488645 0.103269178 0.103739696 0.104483911 0.104670744 0.105501013 0.106373031 0.107127200 0.108255511 0.110203304 0.111229278 0.112609313 0.113574393 0.115158328 0.116298144 0.116887914 0.118790394 0.121401200 0.122564915 0.123905683 0.125578271 0.126354486 0.126475385 0.126827980 0.127977133 0.132213313 0.135181776 0.135964295 0.143241263 0.144136995 0.147237829 0.147559142 0.149817211 0.150847900 0.154640503 0.154766447 0.156768787 0.161333795 0.162060996 0.173917906 0.174503907 0.182321354 0.185820815 0.186610856 0.189729571 0.190475881 0.194531414 0.195992396 0.199129580 0.200460123 0.205302810 0.207224668 0.207606644 0.210307596 0.216877535 0.217532032 0.218020943 0.220894471 0.221392104 0.225458731 0.226812266 0.232436519 0.235270282 0.235793259 0.236132918 0.244814687 0.256145240 0.257402682 0.264039080 0.269959096 0.280789389 0.283995017 0.286421965 0.291984499 0.297093180 0.304634867 0.306049785 0.307399838 0.314731314 0.316852582 0.317494977 0.322273741 0.330180746 0.333289544 0.351846344 0.353064351 0.355614811 0.356119913 0.360114689 0.363205407 0.364627691 0.383859409 0.386079340 0.392333577 0.410706008 0.426164990 0.431326623 0.462539454 0.469586077 0.479248124 0.484642317 0.484721918 0.487482318 0.491520238 0.509960043 0.515410702 0.535191680 0.569585820 0.575433152 0.591090068 0.594349600 0.607540041 0.608513281 0.645111798 0.648048292 0.649917847 0.674603622 0.678404166 0.688336869 0.693532101 0.694275995 0.700432296 0.705707268 0.718558782 0.742340405 0.751465552 0.759486736 0.772225420 0.774861772 0.779837439 0.811201012 0.816777415 0.820551771 0.823324821 0.823812849 0.832521995 0.835136482 0.838338945 0.842821485 0.845975044 0.847891369 0.850347837 0.859925310 0.866034747 0.869303171 0.875017787 0.886673346 0.889353400 0.890012944 0.900915451 0.901184094 0.904507304 0.924291869 0.928346008 0.936927665 0.938310012 0.966505384 0.978062464 0.987660035 1.002075874 1.020480425 1.028862324 1.042907089 1.052994385 1.059224131 1.069500029 1.087059098 1.089209096 1.105694793 1.112132378 1.113154432 1.129942668 1.136594990 1.141441478 1.145762216 1.176916090 1.179246696 1.182003035 1.187757797 1.191701965 1.198878300 1.225351016 1.229100433 1.275051004 1.303132925 1.321487894 1.328530672 1.333535940 1.336737430 1.337612468 1.341833951 1.344809833 1.345561264 1.360001986 1.379786560 1.383557337 1.386333978 1.403362502 1.421410444 1.430312963 1.551525760 1.687391192 1.777086759</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">339</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33543747" y3="0.0582608" z3="-0.19120513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.3802819" y3="0.17184199" z3="0.4226106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64342232" y3="0.44622115" z3="-0.33847141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73110108" y3="1.24032741" z3="-2.26483558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38666439" y3="0.44220562" z3="-1.18602012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73378847" y3="0.84973236" z3="-3.66825385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63968604" y3="1.75206749" z3="-3.14196592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39283268" y3="2.59457838" z3="-4.63126531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5683566" y3="1.25406172" z3="-4.38451269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51551236" y3="2.92998835" z3="-5.19310378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92643839" y3="-0.48033999" z3="-3.44369822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09531995" y3="0.0556235" z3="-1.00504813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39893831" y3="-1.08974747" z3="-2.00319976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.9271774" y3="-0.95795778" z3="-1.83316416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10026586" y3="-2.41420901" z3="-1.84439932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14304445" y3="-3.62154611" z3="0.67959588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01893018" y3="-5.23399684" z3="-4.7452664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24630545" y3="-4.98315362" z3="-3.70564982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84172604" y3="-4.30893369" z3="-1.08164777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77817579" y3="-4.5733446" z3="-2.85422392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56078063" y3="-5.08241235" z3="-3.24512451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85927123" y3="-4.74029617" z3="-1.92860564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49253881" y3="-4.25091825" z3="-1.52592562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8096677" y3="-4.48501588" z3="-3.20316542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35906516" y3="-5.39759821" z3="-3.92020101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.894706" y3="-4.78643503" z3="-1.5827077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03118966" y3="-3.86618425" z3="0.24109608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17191859" y3="-3.65571129" z3="0.88637761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05881476" y3="-4.11950154" z3="0.45221026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16706878" y3="-3.52299094" z3="2.35369062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22568244" y3="-3.34212812" z3="5.15187214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36297881" y3="-3.73090304" z3="3.05659795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00031739" y3="-3.23103356" z3="3.07603348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02690002" y3="-3.1410676" z3="4.46475712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39144818" y3="-3.64259781" z3="4.44558257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2772489" y3="-3.97212258" z3="2.50796932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0409375" y3="-3.09535901" z3="2.57184298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09820309" y3="-2.93313971" z3="5.00355068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32933402" y3="-3.81601931" z3="4.98034213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24615731" y3="-3.27963478" z3="6.24346476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41218269" y3="-3.88439749" z3="-0.62244317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17115515" y3="-3.38009198" z3="-1.0751387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52567173" y3="0.2500219" z3="-4.7179561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0839821" y3="-1.73097371" z3="0.03069559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91044038" y3="-0.97999629" z3="1.19268806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8519645" y3="-0.32417495" z3="1.52559016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37564037" y3="0.54583578" z3="1.2222747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46109215" y3="1.45149686" z3="-0.40041747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97508448" y3="-0.71306855" z3="1.38895044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35158544" y3="1.73272195" z3="2.67135629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88454347" y3="-0.97489202" z3="2.09138809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6571777" y3="-0.36152537" z3="3.35044632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.22214553" y3="0.76541268" z3="-1.23102403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31049088" y3="2.24394294" z3="-0.39488713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44298588" y3="1.93260958" z3="-0.55637492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.008518" y3="-1.08008157" z3="2.42776471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94694338" y3="-0.24994008" z3="1.14739733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.84674281" y3="-1.55289696" z3="0.68682837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40231178" y3="1.18977285" z3="3.63177861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.5859846" y3="2.31815768" z3="2.66537277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19253352" y3="2.44766334" z3="2.62997765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79340703" y3="-0.8156929" z3="3.86183811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57116979" y3="-0.53897666" z3="3.93269327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4897514" y3="0.72138926" z3="3.23111292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83289567" y3="-0.69670312" z3="0.99152079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4139429" y3="-2.02604877" z3="0.85517424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76187245" y3="-2.67265886" z3="1.89780717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.54532626" y3="-1.97666663" z3="3.08307165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.01588838" y3="-0.68123138" z3="3.27597763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.66791405" y3="-0.0482008" z3="2.22253028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52353597" y3="-2.52575262" z3="-0.10939543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37095222" y3="-3.68363688" z3="1.77588921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68458603" y3="-2.57805924" z3="4.10666122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.82848049" y3="-0.16969651" z3="4.22112549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.00555582" y3="0.98567368" z3="2.33632397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.78899415" y3="0.47214456" z3="-4.28706241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77084168" y3="-0.49432489" z3="-4.45978337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42765841" y3="-1.6864633" z3="-5.0870607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14393327" y3="-1.91899603" z3="-5.57125687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83113606" y3="-0.94939905" z3="-5.37558328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.02984351" y3="1.39584807" z3="-3.75436839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78761335" y3="-0.34710095" z3="-4.09469461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44209981" y3="-2.73401935" z3="-5.22333087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08247399" y3="-2.85948127" z3="-6.07339359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85103799" y3="-1.13641137" z3="-5.71572488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.34874585" y3="-1.8829331" z3="5.04586591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31546084" y3="-3.72205531" z3="3.94115305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22269418" y3="-3.63774334" z3="-6.00121972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4427084" y3="-2.64505627" z3="-4.53966259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07234342" y3="1.16453952" z3="-1.48773894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11530731" y3="1.55292631" z3="-2.47000177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.442378" y3="1.49035784" z3="-1.6824014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85718388" y3="2.15193507" z3="-2.81225375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16566825" y3="1.19313731" z3="-0.91675389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91466671" y3="2.39198606" z3="-2.95387358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58046691" y3="2.21785746" z3="-3.63866323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9133007" y3="2.50883374" z3="-3.80498466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86206259" y3="2.48920999" z3="-4.41571046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24847223" y3="3.01367756" z3="-4.71524218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41319898" y3="3.15556116" z3="-3.34589785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.30120298" y3="3.56763252" z3="-4.13807605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22223491" y3="4.16679872" z3="-2.75476583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97635075" y3="5.49940252" z3="-2.98569478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04793805" y3="3.8786276" z3="-2.10229125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.61407432" y3="6.25543329" z3="-2.51850909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.08138299" y3="4.95325493" z3="-4.37103266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90345814" y3="5.9022515" z3="-3.81582863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.23271355" y3="5.25049979" z3="-4.99486873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72340334" y3="6.9651705" z3="-3.99924961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48131845" y3="-2.21165955" z3="-0.28815185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45011036" y3="-3.00349639" z3="-1.0557049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00890217" y3="-2.59564277" z3="0.59964462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09778589" y3="-1.39282152" z3="-0.70524761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18234184" y3="-1.43000308" z3="-1.14021514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32092002" y3="-0.38839009" z3="-1.48463347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10552048" y3="-1.55441989" z3="-0.93718099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42328339" y3="-2.08194741" z3="-1.99312032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3354,.0583,-.1912;7.3803,.1718,.4226;6.6434,.4462,-.3385;4.7311,1.2403,-2.2648;4.3867,.4422,-1.186;2.7338,.8497,-3.6683;3.6397,1.7521,-3.142;1.3928,2.5946,-4.6313;1.5684,1.2541,-4.3845;.5155,2.93,-5.1931;2.9264,-.4803,-3.4437;3.0953,.0556,-1.005;2.3989,-1.0897,-2.0032;.9272,-.958,-1.8332;3.1003,-2.4142,-1.8444;-.143,-3.6215,.6796;-.0189,-5.234,-4.7453;-.2463,-4.9832,-3.7056;-.8417,-4.3089,-1.0816;.7782,-4.5733,-2.8542;-1.5608,-5.0824,-3.2451;-1.8593,-4.7403,-1.9286;.4925,-4.2509,-1.5259;1.8097,-4.485,-3.2032;-2.3591,-5.3976,-3.9202;-2.8947,-4.7864,-1.5827;-1.0312,-3.8662,.2411;-2.1719,-3.6557,.8864;-3.0588,-4.1195,.4522;-2.1671,-3.523,2.3537;-2.2257,-3.3421,5.1519;-3.363,-3.7309,3.0566;-1.0003,-3.231,3.076;-1.0269,-3.1411,4.4648;-3.3914,-3.6426,4.4456;-4.2772,-3.9721,2.508;-.0409,-3.0954,2.5718;-.0982,-2.9331,5.0036;-4.3293,-3.816,4.9803;-2.2462,-3.2796,6.2435;1.4122,-3.8844,-.6224;2.1712,-3.3801,-1.0751;.5257,.25,-4.718;-3.084,-1.731,.0307;-2.9104,-.98,1.1927;-1.852,-.3242,1.5256;-.3756,.5458,1.2223;-.4611,1.4515,-.4004;.9751,-.7131,1.389;-.3516,1.7327,2.6714;-3.8845,-.9749,2.0914;-3.6572,-.3615,3.3504;-.2221,.7654,-1.231;.3105,2.2439,-.3949;-1.443,1.9326,-.5564;1.0085,-1.0801,2.4278;1.9469,-.2499,1.1474;.8467,-1.5529,.6868;-.4023,1.1898,3.6318;.586,2.3182,2.6654;-1.1925,2.4477,2.63;-2.7934,-.8157,3.8618;-4.5712,-.539,3.9327;-3.4898,.7214,3.2311;4.8329,-.6967,.9915;4.4139,-2.026,.8552;3.7619,-2.6727,1.8978;3.5453,-1.9767,3.0831;4.0159,-.6812,3.276;4.6679,-.0482,2.2225;4.5235,-2.5258,-.1094;3.371,-3.6836,1.7759;2.6846,-2.5781,4.1067;3.8285,-.1697,4.2211;5.0056,.9857,2.3363;-.789,.4721,-4.2871;-1.7708,-.4943,-4.4598;-1.4277,-1.6865,-5.0871;-.1439,-1.919,-5.5713;.8311,-.9494,-5.3756;-1.0298,1.3958,-3.7544;-2.7876,-.3471,-4.0947;-2.4421,-2.734,-5.2233;.0825,-2.8595,-6.0734;1.851,-1.1364,-5.7157;2.3487,-1.8829,5.0459;2.3155,-3.7221,3.9412;-2.2227,-3.6377,-6.0012;-3.4427,-2.6451,-4.5397;7.0723,1.1645,-1.4877;6.1153,1.5529,-2.47;8.4424,1.4904,-1.6824;8.8572,2.1519,-2.8123;9.1657,1.1931,-.9168;9.9147,2.392,-2.9539;6.5805,2.2179,-3.6387;7.9133,2.5088,-3.805;5.8621,2.4892,-4.4157;8.2485,3.0137,-4.7152;3.4132,3.1556,-3.3459;2.3012,3.5676,-4.1381;4.2222,4.1668,-2.7548;3.9764,5.4994,-2.9857;5.0479,3.8786,-2.1023;4.6141,6.2554,-2.5185;2.0814,4.9533,-4.371;2.9035,5.9023,-3.8158;1.2327,5.2505,-4.9949;2.7234,6.9652,-3.9992;-4.4813,-2.2117,-.2882;-4.4501,-3.0035,-1.0557;-5.0089,-2.5956,.5996;-5.0978,-1.3928,-.7052;-2.1823,-1.43,-1.1402;-2.3209,-.3884,-1.4846;-1.1055,-1.5544,-.9372;-2.4233,-2.0819,-1.9931;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650425785914</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000765657117 0.000128661961 0.024473547993 0.005459023675</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030807019 -0.000165110 0.000076640 0.000159831 0.000190688 0.000236010 0.000376687 0.000518952 0.000708898 0.000814484 0.000856728 0.000919929 0.001067711 0.001201394 0.001451682 0.001477973 0.001583521 0.001654156 0.001717776 0.001920659 0.001979005 0.002184391 0.002293281 0.002531893 0.002682371 0.002957766 0.003002822 0.003078958 0.003683151 0.003983642 0.004438799 0.004664105 0.004777068 0.005109156 0.005890538 0.006048376 0.006270764 0.006668953 0.006809390 0.007442713 0.007931685 0.008246379 0.008398708 0.009413241 0.009432672 0.009944941 0.010102224 0.011263570 0.011867055 0.012127039 0.012918820 0.013083197 0.014271493 0.014878445 0.015144957 0.015727017 0.015895982 0.016291561 0.016799631 0.017277564 0.018116320 0.018596651 0.018916797 0.019704270 0.020113395 0.020515943 0.021127363 0.021386213 0.021527889 0.023047918 0.023418528 0.026674992 0.026906117 0.028174733 0.028393440 0.029662020 0.030583154 0.031654053 0.033254376 0.033755501 0.034158944 0.035588979 0.036067559 0.037239340 0.038330480 0.039628574 0.040208958 0.041143312 0.042601834 0.044711505 0.045819963 0.047261438 0.048103746 0.049317019 0.050574802 0.051087018 0.051316270 0.051852490 0.052515594 0.052837464 0.052971753 0.053281082 0.054920898 0.055013078 0.056295320 0.056488914 0.056622852 0.057079291 0.057251829 0.059259354 0.060659329 0.061092513 0.061942509 0.062420873 0.063451650 0.064546709 0.065334579 0.066202965 0.066646976 0.068623785 0.069345961 0.070292496 0.072924421 0.074457732 0.074804782 0.076538040 0.079354489 0.084585426 0.087010379 0.087313761 0.087787973 0.089915336 0.090744752 0.091731774 0.094361698 0.095887461 0.096165281 0.096684681 0.097880500 0.098853593 0.100256586 0.100965972 0.102494787 0.103277418 0.103747936 0.104485594 0.104675119 0.105505241 0.106373369 0.107128109 0.108255715 0.110204674 0.111230781 0.112613827 0.113574836 0.115159864 0.116298222 0.116888836 0.118791272 0.121402491 0.122570309 0.123907967 0.125579263 0.126356234 0.126478994 0.126829025 0.127985534 0.132214047 0.135182962 0.135965323 0.143245128 0.144137545 0.147243584 0.147562894 0.149820042 0.150851968 0.154642229 0.154772707 0.156768478 0.161336398 0.162062766 0.173921674 0.174505703 0.182328670 0.185828069 0.186612716 0.189731083 0.190476624 0.194532531 0.195995359 0.199133939 0.200461393 0.205304027 0.207225090 0.207607894 0.210307675 0.216877502 0.217535738 0.218022026 0.220897036 0.221432963 0.225459179 0.226812790 0.232437491 0.235273127 0.235793858 0.236133486 0.244816402 0.256145671 0.257403292 0.264041559 0.269959450 0.280789792 0.284000474 0.286422305 0.291984960 0.297093666 0.304636673 0.306050045 0.307400123 0.314735816 0.316853624 0.317496722 0.322273796 0.330181282 0.333296678 0.351847015 0.353064620 0.355626053 0.356122579 0.360114930 0.363207176 0.364629013 0.383863294 0.386083159 0.392337073 0.410709035 0.426166213 0.431328231 0.462540121 0.469592433 0.479251390 0.484643129 0.484724066 0.487484932 0.491521780 0.509961218 0.515412187 0.535193435 0.569587645 0.575435560 0.591096983 0.594354974 0.607548230 0.608513829 0.645114355 0.648055478 0.649919210 0.674612998 0.678406020 0.688339457 0.693533970 0.694280606 0.700432952 0.705766813 0.718567160 0.742342782 0.751466203 0.759486994 0.772229226 0.774865458 0.779838483 0.811209561 0.816788421 0.820568896 0.823326029 0.823817199 0.832525446 0.835140244 0.838354386 0.842823607 0.845975628 0.847910346 0.850363504 0.859927372 0.866037822 0.869308245 0.875032065 0.886678124 0.889375747 0.890017981 0.900915540 0.901186479 0.904518947 0.924293856 0.928347710 0.936932703 0.938310935 0.966511262 0.978096011 0.987684578 1.002094006 1.020488923 1.028862755 1.042925487 1.052998317 1.059231879 1.069511009 1.087059454 1.089210577 1.105703900 1.112148433 1.113170995 1.129991814 1.136596119 1.141449630 1.145770197 1.176917572 1.179247903 1.182007605 1.187763347 1.191703429 1.198885133 1.225374470 1.229102280 1.275073124 1.303133373 1.321489692 1.328533036 1.333538674 1.336738123 1.337615355 1.341837313 1.344815600 1.345569942 1.360002989 1.379791233 1.383558841 1.386336569 1.403386986 1.421415189 1.430323495 1.551525980 1.687409492 1.777104328</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">340</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34037681" y3="0.05885814" z3="-0.19186864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38708845" y3="0.17056577" z3="0.41605894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64827329" y3="0.44549155" z3="-0.34293199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7314309" y3="1.24066905" z3="-2.2644642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38926857" y3="0.44334084" z3="-1.18436337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73201518" y3="0.84908901" z3="-3.66450641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.638508" y3="1.75187499" z3="-3.14010427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.39062701" y3="2.59259058" z3="-4.62901362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56647896" y3="1.2524158" z3="-4.38106143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.51317444" y3="2.92735863" z3="-5.19101137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92434247" y3="-0.48065099" z3="-3.43812097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09813696" y3="0.05750343" z3="-1.00010005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39847408" y3="-1.08756108" z3="-1.9960409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92727368" y3="-0.95335898" z3="-1.82310437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.09833802" y3="-2.41292591" z3="-1.83821682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14632462" y3="-3.61851168" z3="0.67577773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.00927781" y3="-5.24165034" z3="-4.74445735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.23957021" y3="-4.98789443" z3="-3.70617937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84213005" y3="-4.3073995" z3="-1.08544827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78289675" y3="-4.57745729" z3="-2.85254028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55557184" y3="-5.08432007" z3="-3.24947057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85777524" y3="-4.73878833" z3="-1.93464835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49357615" y3="-4.25187078" z3="-1.52583814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81559031" y3="-4.49144688" z3="-3.19842664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35212383" y3="-5.40014923" z3="-3.9262449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89436888" y3="-4.78266263" z3="-1.59194993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03394899" y3="-3.86330382" z3="0.23640152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17517171" y3="-3.65343713" z3="0.88090009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06188572" y3="-4.11673959" z3="0.44582035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.17045914" y3="-3.52201938" z3="2.34834457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22844441" y3="-3.34372691" z3="5.14666009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3660574" y3="-3.73134942" z3="3.05126358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00373254" y3="-3.22972134" z3="3.07066597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02998895" y3="-3.14102393" z3="4.45946116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39415626" y3="-3.64444065" z3="4.44036048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.28031012" y3="-3.97255914" z3="2.50254686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04459114" y3="-3.09239806" z3="2.56648722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.1012136" y3="-2.93277049" z3="4.99806884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33174583" y3="-3.81905681" z3="4.97520159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24873162" y3="-3.28230112" z3="6.23831712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4108793" y3="-3.88492948" z3="-0.62016702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1701936" y3="-3.379379" z3="-1.0711876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52467195" y3="0.24749435" z3="-4.71467436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08413183" y3="-1.72695616" z3="0.0269359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91175994" y3="-0.97981251" z3="1.19142141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.85102934" y3="-0.33042128" z3="1.52965115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37819959" y3="0.54799754" z3="1.23554548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.46118703" y3="1.45701473" z3="-0.3852985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.97804465" y3="-0.70517846" z3="1.40258698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36627515" y3="1.73022681" z3="2.68866741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.8886856" y3="-0.97354506" z3="2.08706169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.66365544" y3="-0.36294799" z3="3.3478701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21916587" y3="0.77263324" z3="-1.21644834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.30907912" y3="2.25062801" z3="-0.37643421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.44336328" y3="1.93682307" z3="-0.54302215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01268299" y3="-1.0725344" z3="2.44124784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.94860047" y3="-0.23886488" z3="1.16125925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85261364" y3="-1.54542365" z3="0.70037413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41947989" y3="1.18346093" z3="3.64680864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.56848692" y3="2.32010561" z3="2.68984631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.21038778" y3="2.44130323" z3="2.64569862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.80249274" y3="-0.81988106" z3="3.86114749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57983045" y3="-0.53921281" z3="3.92702875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.493515" y3="0.71980845" z3="3.23090276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83983486" y3="-0.69643867" z3="0.991607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41835871" y3="-2.02490863" z3="0.85442585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76565034" y3="-2.6712967" z3="1.89675437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55152961" y3="-1.97621155" z3="3.08298875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02581604" y3="-0.68229417" z3="3.27717916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67811189" y3="-0.0493308" z3="2.22378036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52591179" y3="-2.52384618" z3="-0.11064888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.372145" y3="-3.68117339" z3="1.77377539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68876096" y3="-2.57639326" z3="4.10563467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84064872" y3="-0.17146253" z3="4.22312755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01818443" y3="0.98362037" z3="2.3385633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79071985" y3="0.46930652" z3="-4.28583069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77201727" y3="-0.49750845" z3="-4.45993761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42744924" y3="-1.6897947" z3="-5.0861938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14278634" y3="-1.92228466" z3="-5.56791195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.8316357" y3="-0.9522818" z3="-5.3709903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03271413" y3="1.39319648" z3="-3.7539644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.78941904" y3="-0.35041506" z3="-4.0965308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44134456" y3="-2.7376239" z3="-5.22384406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.0847778" y3="-2.86301838" z3="-6.06910336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85220237" y3="-1.13920407" z3="-5.70924535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35413282" y3="-1.88134182" z3="5.04527366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31661719" y3="-3.71919184" z3="3.93876431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22117332" y3="-3.64045485" z3="-6.00251511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44220653" y3="-2.64981002" z3="-4.54038156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07471316" y3="1.16297481" z3="-1.4937275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11535404" y3="1.55191445" z3="-2.47351157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44463226" y3="1.48695299" z3="-1.69267997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8569921" y3="2.14707364" z3="-2.82425631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16986252" y3="1.18922591" z3="-0.92905964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91437875" y3="2.38540268" z3="-2.96926622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57795906" y3="2.21549786" z3="-3.64396266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.91065159" y3="2.50454361" z3="-3.81443438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85773509" y3="2.48706736" z3="-4.41923109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24377355" y3="3.008325" z3="-4.7260495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.41201662" y3="3.15507999" z3="-3.34573346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2992043" y3="3.56619695" z3="-4.13726236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.22209173" y3="4.16697375" z3="-2.75717968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.97614446" y3="5.49925502" z3="-2.98964655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04875475" y3="3.87952033" z3="-2.10560281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6147087" y3="6.25587537" z3="-2.52448682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07919065" y3="4.95149309" z3="-4.37164382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.90207097" y3="5.90114589" z3="-3.81869979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22975593" y3="5.24801458" z3="-4.99476746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.72189293" y3="6.96380022" z3="-4.00327102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48137542" y3="-2.20422279" z3="-0.29686793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4495338" y3="-2.99369087" z3="-1.06686911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.01188189" y3="-2.59012822" z3="0.58842497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09529538" y3="-1.38294978" z3="-0.71284272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17823889" y3="-1.42570464" z3="-1.1404245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31505674" y3="-0.38390093" z3="-1.48472979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10221231" y3="-1.55055597" z3="-0.93353221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41649715" y3="-2.07702289" z3="-1.99454746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3404,.0589,-.1919;7.3871,.1706,.4161;6.6483,.4455,-.3429;4.7314,1.2407,-2.2645;4.3893,.4433,-1.1844;2.732,.8491,-3.6645;3.6385,1.7519,-3.1401;1.3906,2.5926,-4.629;1.5665,1.2524,-4.3811;.5132,2.9274,-5.191;2.9243,-.4807,-3.4381;3.0981,.0575,-1.0001;2.3985,-1.0876,-1.996;.9273,-.9534,-1.8231;3.0983,-2.4129,-1.8382;-.1463,-3.6185,.6758;-.0093,-5.2417,-4.7445;-.2396,-4.9879,-3.7062;-.8421,-4.3074,-1.0854;.7829,-4.5775,-2.8525;-1.5556,-5.0843,-3.2495;-1.8578,-4.7388,-1.9346;.4936,-4.2519,-1.5258;1.8156,-4.4914,-3.1984;-2.3521,-5.4001,-3.9262;-2.8944,-4.7827,-1.5919;-1.0339,-3.8633,.2364;-2.1752,-3.6534,.8809;-3.0619,-4.1167,.4458;-2.1705,-3.522,2.3483;-2.2284,-3.3437,5.1467;-3.3661,-3.7313,3.0513;-1.0037,-3.2297,3.0707;-1.03,-3.141,4.4595;-3.3942,-3.6444,4.4404;-4.2803,-3.9726,2.5025;-.0446,-3.0924,2.5665;-.1012,-2.9328,4.9981;-4.3317,-3.8191,4.9752;-2.2487,-3.2823,6.2383;1.4109,-3.8849,-.6202;2.1702,-3.3794,-1.0712;.5247,.2475,-4.7147;-3.0841,-1.727,.0269;-2.9118,-.9798,1.1914;-1.851,-.3304,1.5297;-.3782,.548,1.2355;-.4612,1.457,-.3853;.978,-.7052,1.4026;-.3663,1.7302,2.6887;-3.8887,-.9735,2.0871;-3.6637,-.3629,3.3479;-.2192,.7726,-1.2164;.3091,2.2506,-.3764;-1.4434,1.9368,-.543;1.0127,-1.0725,2.4412;1.9486,-.2389,1.1613;.8526,-1.5454,.7004;-.4195,1.1835,3.6468;.5685,2.3201,2.6898;-1.2104,2.4413,2.6457;-2.8025,-.8199,3.8611;-4.5798,-.5392,3.927;-3.4935,.7198,3.2309;4.8398,-.6964,.9916;4.4184,-2.0249,.8544;3.7657,-2.6713,1.8968;3.5515,-1.9762,3.083;4.0258,-.6823,3.2772;4.6781,-.0493,2.2238;4.5259,-2.5238,-.1106;3.3721,-3.6812,1.7738;2.6888,-2.5764,4.1056;3.8406,-.1715,4.2231;5.0182,.9836,2.3386;-.7907,.4693,-4.2858;-1.772,-.4975,-4.4599;-1.4274,-1.6898,-5.0862;-.1428,-1.9223,-5.5679;.8316,-.9523,-5.371;-1.0327,1.3932,-3.754;-2.7894,-.3504,-4.0965;-2.4413,-2.7376,-5.2238;.0848,-2.863,-6.0691;1.8522,-1.1392,-5.7092;2.3541,-1.8813,5.0453;2.3166,-3.7192,3.9388;-2.2212,-3.6405,-6.0025;-3.4422,-2.6498,-4.5404;7.0747,1.163,-1.4937;6.1154,1.5519,-2.4735;8.4446,1.487,-1.6927;8.857,2.1471,-2.8243;9.1699,1.1892,-.9291;9.9144,2.3854,-2.9693;6.578,2.2155,-3.644;7.9107,2.5045,-3.8144;5.8577,2.4871,-4.4192;8.2438,3.0083,-4.726;3.412,3.1551,-3.3457;2.2992,3.5662,-4.1373;4.2221,4.167,-2.7572;3.9761,5.4993,-2.9896;5.0488,3.8795,-2.1056;4.6147,6.2559,-2.5245;2.0792,4.9515,-4.3716;2.9021,5.9011,-3.8187;1.2298,5.248,-4.9948;2.7219,6.9638,-4.0033;-4.4814,-2.2042,-.2969;-4.4495,-2.9937,-1.0669;-5.0119,-2.5901,.5884;-5.0953,-1.3829,-.7128;-2.1782,-1.4257,-1.1404;-2.3151,-.3839,-1.4847;-1.1022,-1.5506,-.9335;-2.4165,-2.077,-1.9945;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650426054131</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000694484401 0.000120512204 0.017228821405 0.005317292160</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030807356 0.000021641 0.000066312 0.000135449 0.000186924 0.000316505 0.000348507 0.000449509 0.000643999 0.000811680 0.000845671 0.000908354 0.001032059 0.001201157 0.001450572 0.001477918 0.001591000 0.001643573 0.001715696 0.001920844 0.001983928 0.002184735 0.002292679 0.002532235 0.002681953 0.002956176 0.002998379 0.003079135 0.003687974 0.004013176 0.004438062 0.004664234 0.004777342 0.005108706 0.005893958 0.006048856 0.006269984 0.006668547 0.006807409 0.007439410 0.007933312 0.008248427 0.008398288 0.009413756 0.009433392 0.009942175 0.010102876 0.011265917 0.011866864 0.012120178 0.012917992 0.013082649 0.014268247 0.014876042 0.015140137 0.015723183 0.015895730 0.016292182 0.016800970 0.017271620 0.018117206 0.018589501 0.018920360 0.019707095 0.020112220 0.020518451 0.021127540 0.021386539 0.021527814 0.023047119 0.023419997 0.026681325 0.026906195 0.028180758 0.028392964 0.029664749 0.030586522 0.031654940 0.033258319 0.033757020 0.034158875 0.035575021 0.036051296 0.037239536 0.038330072 0.039627965 0.040210461 0.041145118 0.042603713 0.044711617 0.045822735 0.047265178 0.048111192 0.049322921 0.050581113 0.051087163 0.051316565 0.051853080 0.052516602 0.052838187 0.052972037 0.053281437 0.054924151 0.055014900 0.056296323 0.056489225 0.056623148 0.057079715 0.057252020 0.059261161 0.060659623 0.061092592 0.061947735 0.062421768 0.063452445 0.064547112 0.065336137 0.066203752 0.066647575 0.068629802 0.069347630 0.070292615 0.072936512 0.074453822 0.074804942 0.076538477 0.079355018 0.084585397 0.087009823 0.087313491 0.087789591 0.089920705 0.090749529 0.091736765 0.094364090 0.095899775 0.096205862 0.096747492 0.097881312 0.098855369 0.100258729 0.100985319 0.102499574 0.103290249 0.103760166 0.104486189 0.104681290 0.105511397 0.106374317 0.107129073 0.108254912 0.110207627 0.111231911 0.112618371 0.113577236 0.115162491 0.116298264 0.116889958 0.118793289 0.121404286 0.122573751 0.123910065 0.125580444 0.126361737 0.126481361 0.126829012 0.127989974 0.132213832 0.135185581 0.135964926 0.143250328 0.144137838 0.147257518 0.147559091 0.149820649 0.150842236 0.154645861 0.154778585 0.156767575 0.161338893 0.162065834 0.173926370 0.174506899 0.182330757 0.185837179 0.186613433 0.189732811 0.190478940 0.194533826 0.196001335 0.199143925 0.200463118 0.205307358 0.207226058 0.207610809 0.210307987 0.216877903 0.217537099 0.218023677 0.220898002 0.221478671 0.225459562 0.226813847 0.232438503 0.235277210 0.235795040 0.236134061 0.244817935 0.256145787 0.257403999 0.264043783 0.269960132 0.280790422 0.284002827 0.286422866 0.291984876 0.297094431 0.304637725 0.306050333 0.307402085 0.314743260 0.316855450 0.317499195 0.322273914 0.330183634 0.333305894 0.351848406 0.353064486 0.355633616 0.356126772 0.360115530 0.363210686 0.364630445 0.383861170 0.386086222 0.392343135 0.410712691 0.426168091 0.431329831 0.462541755 0.469596690 0.479253487 0.484643271 0.484724639 0.487485649 0.491524386 0.509962476 0.515414031 0.535195778 0.569591178 0.575440841 0.591104268 0.594361621 0.607555706 0.608517370 0.645119508 0.648068360 0.649920407 0.674628314 0.678407311 0.688343705 0.693535498 0.694292672 0.700433939 0.705859377 0.718585795 0.742346003 0.751468437 0.759487661 0.772229764 0.774867728 0.779839073 0.811220091 0.816810093 0.820621087 0.823327267 0.823829693 0.832534567 0.835145481 0.838368854 0.842827366 0.845976371 0.847930498 0.850385043 0.859930419 0.866042236 0.869313592 0.875053418 0.886680106 0.889382673 0.890023449 0.900916294 0.901190939 0.904533891 0.924295360 0.928350590 0.936936896 0.938315486 0.966522077 0.978149195 0.987720938 1.002116843 1.020505317 1.028865356 1.042954487 1.053001209 1.059234132 1.069531507 1.087060047 1.089210986 1.105721399 1.112165752 1.113185044 1.130035149 1.136597155 1.141459574 1.145774418 1.176919176 1.179249414 1.182014715 1.187767256 1.191705715 1.198892341 1.225416326 1.229103063 1.275086118 1.303136777 1.321492455 1.328533223 1.333538563 1.336739272 1.337623007 1.341846631 1.344817010 1.345573038 1.360003938 1.379792923 1.383562287 1.386343730 1.403431238 1.421416501 1.430341105 1.551526536 1.687428377 1.777112269</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">341</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33653762" y3="0.05725767" z3="-0.18969278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38160502" y3="0.17503269" z3="0.42282337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64352473" y3="0.44813524" z3="-0.33759748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7280145" y3="1.23894123" z3="-2.26237001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38608563" y3="0.43984056" z3="-1.18362481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7301518" y3="0.84596169" z3="-3.66432078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.6352641" y3="1.74924019" z3="-3.1387786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38663539" y3="2.58894684" z3="-4.62714521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56389668" y3="1.2487901" z3="-4.37991594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50898845" y3="2.92311152" z3="-5.18917711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92491527" y3="-0.48387943" z3="-3.44017263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09562935" y3="0.05087653" z3="-1.00150624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.39894584" y3="-1.09420882" z3="-1.99959487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92730144" y3="-0.96276903" z3="-1.82800581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10057218" y3="-2.41868195" z3="-1.84255856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.1446776" y3="-3.61779588" z3="0.67437236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01480995" y3="-5.24655904" z3="-4.74471695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24376866" y3="-4.9912622" z3="-3.70653525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84281407" y3="-4.30680872" z3="-1.08597481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78012574" y3="-4.58239365" z3="-2.85403834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55952796" y3="-5.08421803" z3="-3.24873578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85995537" y3="-4.73658519" z3="-1.93405315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4926678" y3="-4.25497392" z3="-1.52741431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8128932" y3="-4.49949414" z3="-3.20078184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.358097" y3="-5.398005" z3="-3.92467181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.8964345" y3="-4.77751515" z3="-1.59067506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03289326" y3="-3.86133382" z3="0.23566824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17326077" y3="-3.64973644" z3="0.88086834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.06088542" y3="-4.11170443" z3="0.44623036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16808231" y3="-3.51777371" z3="2.34818685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22540295" y3="-3.3400451" z3="5.14654533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36415469" y3="-3.72392427" z3="3.05120567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00060247" y3="-3.22884811" z3="3.07043585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02657514" y3="-3.14041852" z3="4.45924533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39183691" y3="-3.637351" z3="4.44033094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27987236" y3="-3.96135011" z3="2.50235942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04096059" y3="-3.09474148" z3="2.56614039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09683573" y3="-2.93584095" z3="4.99809131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32988205" y3="-3.80937014" z3="4.97520709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24514898" y3="-3.27925599" z3="6.23827039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41201502" y3="-3.89001795" z3="-0.62280751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17153329" y3="-3.38591784" z3="-1.07462236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52256369" y3="0.24334707" z3="-4.71467761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08154282" y3="-1.72206354" z3="0.0263442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90704168" y3="-0.97347874" z3="1.18952733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84636052" y3="-0.32247922" z3="1.52477894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37024602" y3="0.54943227" z3="1.22819422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44915592" y3="1.45570663" z3="-0.39436022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98091502" y3="-0.70815707" z3="1.39898798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35322745" y3="1.73528597" z3="2.6782479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88228378" y3="-0.96627262" z3="2.08709092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65455175" y3="-0.35488599" z3="3.3470066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21171765" y3="0.76862895" z3="-1.22457685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32604638" y3="2.24477287" z3="-0.38733574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42865032" y3="1.94091494" z3="-0.55217669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01163699" y3="-1.07720984" z3="2.43782396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95316839" y3="-0.24417498" z3="1.16089373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85485513" y3="-1.54703156" z3="0.6955263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41048764" y3="1.19163178" z3="3.63793751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58472493" y3="2.31986251" z3="2.67862324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19315896" y3="2.45116038" z3="2.63233386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79324425" y3="-0.81266038" z3="3.85930941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57008455" y3="-0.52960609" z3="3.92760587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48312211" y3="0.7276055" z3="3.22904394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83652832" y3="-0.70029553" z3="0.99254397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41540241" y3="-2.02892604" z3="0.85325983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76432985" y3="-2.67731136" z3="1.89543484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55123315" y3="-1.9842076" z3="3.08358086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02467361" y3="-0.69021647" z3="3.27936349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67566662" y3="-0.05527269" z3="2.22630862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52418271" y3="-2.52699818" z3="-0.11135213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37212075" y3="-3.68749194" z3="1.77163411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.69014999" y3="-2.58658367" z3="4.10637205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.83834135" y3="-0.18045011" z3="4.22488238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01460561" y3="0.97785476" z3="2.34218734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79355851" y3="0.46616262" z3="-4.28817824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77505811" y3="-0.50036311" z3="-4.46394615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42997528" y3="-1.6930977" z3="-5.08847271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.1444738" y3="-1.9264751" z3="-5.56706507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83008785" y3="-0.95704049" z3="-5.36942266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03606774" y3="1.39059768" z3="-3.75800191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79301754" y3="-0.35246889" z3="-4.10244909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44387317" y3="-2.74045584" z3="-5.2273216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08382489" y3="-2.86768157" z3="-6.06767803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85122267" y3="-1.14478104" z3="-5.70530569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35707864" y3="-1.89357005" z3="5.04795868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.3174418" y3="-3.72900569" z3="3.93732638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.22411629" y3="-3.64117271" z3="-6.00861201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44400807" y3="-2.6547732" z3="-4.54277905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07004992" y3="1.16782512" z3="-1.48675144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11150738" y3="1.55432334" z3="-2.46830215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43929808" y3="1.49710359" z3="-1.68200305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8518872" y3="2.15971373" z3="-2.81186442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16374988" y3="1.2013527" z3="-0.91686408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90871244" y3="2.40242449" z3="-2.95389171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57464615" y3="2.22071076" z3="-3.63701433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90664813" y3="2.51458846" z3="-3.80400837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85538326" y3="2.49069682" z3="-4.41367225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24015363" y3="3.02109109" z3="-4.71426242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40678591" y3="3.15262334" z3="-3.34297432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29414963" y3="3.56299345" z3="-4.13511952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21464386" y3="4.1656179" z3="-2.75270791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96755907" y3="5.49771527" z3="-2.98521887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04082471" y3="3.87905106" z3="-2.100166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60509151" y3="6.25457877" z3="-2.51962296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.07283114" y3="4.94815466" z3="-4.36945909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89432989" y3="5.89849787" z3="-3.81582315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.22367381" y3="5.24382878" z3="-4.99338353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.71323475" y3="6.96109171" z3="-4.00050776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.479613" y3="-2.19896951" z3="-0.2946485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44963432" y3="-2.98856417" z3="-1.06456881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00829256" y3="-2.58431026" z3="0.59196788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09456041" y3="-1.37785817" z3="-0.70968624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17709194" y3="-1.42315018" z3="-1.14274036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31414243" y3="-0.3820253" z3="-1.48876879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10080597" y3="-1.54814155" z3="-0.93731133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41695752" y3="-2.07595639" z3="-1.99557595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3365,.0573,-.1897;7.3816,.175,.4228;6.6435,.4481,-.3376;4.728,1.2389,-2.2624;4.3861,.4398,-1.1836;2.7302,.846,-3.6643;3.6353,1.7492,-3.1388;1.3866,2.5889,-4.6271;1.5639,1.2488,-4.3799;.509,2.9231,-5.1892;2.9249,-.4839,-3.4402;3.0956,.0509,-1.0015;2.3989,-1.0942,-1.9996;.9273,-.9628,-1.828;3.1006,-2.4187,-1.8426;-.1447,-3.6178,.6744;-.0148,-5.2466,-4.7447;-.2438,-4.9913,-3.7065;-.8428,-4.3068,-1.086;.7801,-4.5824,-2.854;-1.5595,-5.0842,-3.2487;-1.86,-4.7366,-1.9341;.4927,-4.255,-1.5274;1.8129,-4.4995,-3.2008;-2.3581,-5.398,-3.9247;-2.8964,-4.7775,-1.5907;-1.0329,-3.8613,.2357;-2.1733,-3.6497,.8809;-3.0609,-4.1117,.4462;-2.1681,-3.5178,2.3482;-2.2254,-3.34,5.1465;-3.3642,-3.7239,3.0512;-1.0006,-3.2288,3.0704;-1.0266,-3.1404,4.4592;-3.3918,-3.6374,4.4403;-4.2799,-3.9614,2.5024;-.041,-3.0947,2.5661;-.0968,-2.9358,4.9981;-4.3299,-3.8094,4.9752;-2.2451,-3.2793,6.2383;1.412,-3.89,-.6228;2.1715,-3.3859,-1.0746;.5226,.2433,-4.7147;-3.0815,-1.7221,.0263;-2.907,-.9735,1.1895;-1.8464,-.3225,1.5248;-.3702,.5494,1.2282;-.4492,1.4557,-.3944;.9809,-.7082,1.399;-.3532,1.7353,2.6782;-3.8823,-.9663,2.0871;-3.6546,-.3549,3.347;-.2117,.7686,-1.2246;.326,2.2448,-.3873;-1.4287,1.9409,-.5522;1.0116,-1.0772,2.4378;1.9532,-.2442,1.1609;.8549,-1.547,.6955;-.4105,1.1916,3.6379;.5847,2.3199,2.6786;-1.1932,2.4512,2.6323;-2.7932,-.8127,3.8593;-4.5701,-.5296,3.9276;-3.4831,.7276,3.229;4.8365,-.7003,.9925;4.4154,-2.0289,.8533;3.7643,-2.6773,1.8954;3.5512,-1.9842,3.0836;4.0247,-.6902,3.2794;4.6757,-.0553,2.2263;4.5242,-2.527,-.1114;3.3721,-3.6875,1.7716;2.6901,-2.5866,4.1064;3.8383,-.1805,4.2249;5.0146,.9779,2.3422;-.7936,.4662,-4.2882;-1.7751,-.5004,-4.4639;-1.43,-1.6931,-5.0885;-.1445,-1.9265,-5.5671;.8301,-.957,-5.3694;-1.0361,1.3906,-3.758;-2.793,-.3525,-4.1024;-2.4439,-2.7405,-5.2273;.0838,-2.8677,-6.0677;1.8512,-1.1448,-5.7053;2.3571,-1.8936,5.048;2.3174,-3.729,3.9373;-2.2241,-3.6412,-6.0086;-3.444,-2.6548,-4.5428;7.07,1.1678,-1.4868;6.1115,1.5543,-2.4683;8.4393,1.4971,-1.682;8.8519,2.1597,-2.8119;9.1637,1.2014,-.9169;9.9087,2.4024,-2.9539;6.5746,2.2207,-3.637;7.9066,2.5146,-3.804;5.8554,2.4907,-4.4137;8.2402,3.0211,-4.7143;3.4068,3.1526,-3.343;2.2941,3.563,-4.1351;4.2146,4.1656,-2.7527;3.9676,5.4977,-2.9852;5.0408,3.8791,-2.1002;4.6051,6.2546,-2.5196;2.0728,4.9482,-4.3695;2.8943,5.8985,-3.8158;1.2237,5.2438,-4.9934;2.7132,6.9611,-4.0005;-4.4796,-2.199,-.2946;-4.4496,-2.9886,-1.0646;-5.0083,-2.5843,.592;-5.0946,-1.3779,-.7097;-2.1771,-1.4232,-1.1427;-2.3141,-.382,-1.4888;-1.1008,-1.5481,-.9373;-2.417,-2.076,-1.9956;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650427321307</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000546118507 0.000097536950 0.025032481135 0.005316246855</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030808959 0.000001451 0.000083351 0.000150955 0.000169741 0.000308872 0.000364515 0.000500988 0.000670444 0.000812014 0.000852685 0.000903828 0.001038820 0.001201323 0.001447291 0.001476298 0.001595853 0.001641019 0.001714862 0.001929167 0.001993006 0.002183756 0.002290799 0.002532167 0.002678777 0.002955194 0.002996075 0.003078663 0.003687919 0.004010302 0.004439506 0.004664037 0.004777268 0.005109526 0.005893372 0.006050175 0.006268597 0.006667699 0.006805822 0.007438367 0.007933474 0.008249055 0.008397882 0.009412264 0.009433402 0.009939892 0.010103980 0.011266486 0.011864033 0.012113749 0.012913454 0.013082752 0.014259780 0.014875183 0.015129325 0.015717755 0.015893686 0.016291273 0.016803396 0.017264186 0.018114134 0.018577642 0.018921661 0.019708781 0.020110485 0.020518569 0.021127031 0.021386488 0.021525033 0.023045833 0.023420052 0.026684491 0.026906110 0.028184965 0.028394321 0.029667225 0.030588153 0.031655703 0.033258114 0.033756958 0.034157957 0.035550149 0.036037686 0.037239934 0.038325090 0.039625987 0.040211137 0.041145446 0.042604914 0.044711551 0.045824584 0.047265803 0.048112253 0.049325943 0.050580951 0.051087135 0.051316683 0.051853738 0.052517103 0.052838754 0.052972227 0.053281728 0.054924644 0.055015489 0.056298214 0.056493432 0.056623646 0.057079857 0.057252099 0.059262803 0.060659565 0.061092565 0.061949803 0.062422752 0.063452688 0.064547278 0.065337867 0.066206074 0.066648404 0.068633698 0.069348521 0.070292791 0.072942615 0.074451898 0.074805052 0.076538669 0.079357633 0.084585242 0.087009433 0.087314428 0.087790467 0.089922635 0.090751495 0.091739991 0.094364432 0.095904598 0.096228165 0.096787037 0.097881688 0.098857284 0.100260470 0.100999316 0.102502303 0.103299196 0.103772965 0.104487311 0.104685362 0.105515727 0.106374388 0.107129367 0.108253937 0.110209116 0.111232788 0.112621770 0.113578113 0.115164305 0.116298490 0.116890604 0.118794805 0.121405058 0.122576700 0.123912763 0.125583096 0.126364623 0.126484329 0.126829397 0.127993541 0.132214127 0.135185591 0.135966166 0.143251750 0.144138453 0.147260731 0.147553832 0.149818684 0.150822271 0.154645974 0.154780940 0.156767434 0.161342208 0.162067879 0.173928709 0.174508414 0.182335472 0.185849890 0.186614999 0.189734366 0.190479641 0.194534303 0.196005586 0.199148342 0.200464347 0.205308466 0.207226734 0.207611577 0.210308181 0.216878301 0.217540714 0.218024940 0.220898679 0.221512427 0.225459900 0.226814936 0.232439027 0.235278119 0.235796217 0.236134385 0.244819197 0.256145794 0.257404747 0.264045222 0.269959822 0.280790639 0.284006488 0.286423484 0.291984778 0.297096559 0.304639252 0.306050296 0.307402815 0.314747697 0.316856081 0.317500013 0.322274327 0.330184666 0.333310169 0.351848572 0.353064568 0.355644255 0.356129795 0.360115679 0.363211960 0.364630841 0.383856212 0.386087977 0.392345255 0.410716405 0.426169166 0.431330553 0.462542776 0.469599786 0.479253887 0.484644179 0.484726135 0.487488644 0.491525490 0.509966054 0.515412662 0.535193049 0.569596490 0.575441757 0.591107876 0.594366386 0.607560026 0.608517358 0.645119105 0.648074042 0.649921160 0.674633203 0.678406387 0.688348270 0.693536676 0.694305856 0.700435048 0.705924153 0.718591699 0.742348597 0.751470151 0.759489234 0.772230349 0.774868760 0.779840749 0.811222396 0.816814024 0.820628994 0.823329532 0.823831559 0.832539761 0.835149082 0.838379997 0.842828259 0.845976719 0.847935624 0.850397382 0.859932476 0.866044252 0.869318389 0.875064854 0.886683533 0.889399752 0.890024572 0.900916314 0.901192821 0.904549315 0.924296547 0.928352020 0.936942173 0.938317266 0.966529342 0.978193892 0.987747694 1.002133037 1.020521759 1.028868133 1.042979294 1.053004230 1.059241000 1.069548319 1.087060912 1.089215233 1.105732910 1.112172501 1.113194793 1.130076692 1.136598780 1.141466704 1.145781034 1.176921584 1.179249552 1.182019859 1.187770294 1.191706463 1.198897569 1.225447182 1.229104586 1.275089995 1.303141977 1.321494966 1.328534914 1.333541997 1.336740068 1.337618481 1.341842215 1.344820539 1.345580163 1.360005862 1.379794101 1.383563108 1.386346028 1.403353756 1.421423550 1.430331538 1.551526641 1.687442167 1.777131100</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">342</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33773917" y3="0.05138794" z3="-0.19095959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38272062" y3="0.17012671" z3="0.42132895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64436566" y3="0.44371883" z3="-0.33858106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72793186" y3="1.23636326" z3="-2.26144429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38695644" y3="0.43464846" z3="-1.18425304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72997217" y3="0.84408668" z3="-3.66368092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63402181" y3="1.74744199" z3="-3.13590532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38332528" y3="2.58787826" z3="-4.62043744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56279409" y3="1.24714499" z3="-4.37784224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50477104" y3="2.92246047" z3="-5.1808243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92632736" y3="-0.48604909" z3="-3.44247268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09683489" y3="0.04443635" z3="-1.00285591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40094994" y3="-1.09949446" z3="-2.00291751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92920256" y3="-0.96944465" z3="-1.83103929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10340332" y3="-2.42373266" z3="-1.84772241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14308065" y3="-3.61330036" z3="0.6735567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01467953" y3="-5.25290934" z3="-4.74269861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24335694" y3="-4.99543761" z3="-3.70498661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84165447" y3="-4.30535603" z3="-1.08563293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78111144" y3="-4.58685959" z3="-2.85297237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55938455" y3="-5.08537812" z3="-3.24721662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85938787" y3="-4.73495594" z3="-1.933207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49395618" y3="-4.2565964" z3="-1.52697002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81400196" y3="-4.50610877" z3="-3.19962513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35794419" y3="-5.39953274" z3="-3.92265374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89600098" y3="-4.77344607" z3="-1.58999849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03145756" y3="-3.85742749" z3="0.23530803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17178947" y3="-3.64669039" z3="0.88083166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05900944" y3="-4.10951721" z3="0.44638884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16684843" y3="-3.51403639" z3="2.34807063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.2251235" y3="-3.33545566" z3="5.14633268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.3630981" y3="-3.72042137" z3="3.05082166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99952552" y3="-3.22454025" z3="3.07056355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02596" y3="-3.13583475" z3="4.45935704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39138799" y3="-3.63323898" z3="4.43985878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.2778458" y3="-3.95955976" z3="2.50197669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03993195" y3="-3.08992574" z3="2.56648026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09689696" y3="-2.93027454" z3="4.99841494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32960108" y3="-3.80546182" z3="4.97449259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24541759" y3="-3.27411631" z3="6.23797598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41387646" y3="-3.89150005" z3="-0.62303201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17369545" y3="-3.38947167" z3="-1.07612754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52251738" y3="0.24160542" z3="-4.71441368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08305549" y3="-1.71973929" z3="0.02646906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9048626" y3="-0.96951528" z3="1.18805522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84302417" y3="-0.31810669" z3="1.5188838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.36788023" y3="0.55399661" z3="1.21802562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44733519" y3="1.45272251" z3="-0.40873224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98295392" y3="-0.70333845" z3="1.39563791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35184892" y3="1.74774148" z3="2.66169399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87721455" y3="-0.96103153" z3="2.0887309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64467235" y3="-0.34951763" z3="3.34778397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21044607" y3="0.76217278" z3="-1.23624092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.327639" y3="2.2419173" z3="-0.40555303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42697618" y3="1.93734628" z3="-0.5678614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01194963" y3="-1.06765262" z3="2.43578332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95608807" y3="-0.24139483" z3="1.15673338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8572367" y3="-1.54513802" z3="0.69556243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.40672394" y3="1.20945606" z3="3.62454222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.58473887" y3="2.33465826" z3="2.65754585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19360458" y3="2.46128944" z3="2.61266004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78164278" y3="-0.80761384" z3="3.85703952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.55811067" y3="-0.52365148" z3="3.93189594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.4731284" y3="0.73279465" z3="3.22898007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8378471" y3="-0.70622396" z3="0.9911791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41420271" y3="-2.0338556" z3="0.85192064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.7618082" y3="-2.68114602" z3="1.89389046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55029113" y3="-1.98785631" z3="3.0818403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02673458" y3="-0.69503301" z3="3.27789954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67861002" y3="-0.06113348" z3="2.22482949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52040183" y3="-2.53136947" z3="-0.11395676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36683747" y3="-3.69031231" z3="1.76958533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6886839" y3="-2.58879362" z3="4.10498065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84326178" y3="-0.18562404" z3="4.22486862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02003549" y3="0.97121619" z3="2.34097802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79396392" y3="0.46243022" z3="-4.28818919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.7743346" y3="-0.5048888" z3="-4.46495279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42773338" y3="-1.69664769" z3="-5.09073279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14198433" y3="-1.92795537" z3="-5.57002069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.831422" y3="-0.95750023" z3="-5.37107092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03771552" y3="1.38583859" z3="-3.7565227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79261151" y3="-0.35854025" z3="-4.10361068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44046884" y3="-2.74517543" z3="-5.23039817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08728683" y3="-2.86824069" z3="-6.07144432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85272915" y3="-1.14359131" z3="-5.70741014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3582565" y3="-1.89561681" z3="5.04743429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31332429" y3="-3.73021896" z3="3.93578576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21844906" y3="-3.64687235" z3="-6.00987607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4420634" y3="-2.65931231" z3="-4.54795192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07003927" y3="1.16601958" z3="-1.48657197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11094453" y3="1.55371798" z3="-2.46709631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.43879504" y3="1.4971195" z3="-1.68144114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85041122" y3="2.1631573" z3="-2.80980794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16372162" y3="1.20046534" z3="-0.91712024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90687843" y3="2.40737407" z3="-2.95150798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57293638" y3="2.22333124" z3="-3.63436435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90458669" y3="2.51938854" z3="-3.80090171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85306341" y3="2.49432761" z3="-4.41014087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23731554" y3="3.02813411" z3="-4.71002267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40323087" y3="3.15093308" z3="-3.33529431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28912873" y3="3.56211019" z3="-4.12493638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.20987557" y3="4.16284731" z3="-2.74195468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95954745" y3="5.49540438" z3="-2.96829603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03730886" y3="3.87521598" z3="-2.09146287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59559425" y3="6.25186402" z3="-2.4996149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06467247" y3="4.947728" z3="-4.35316471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88438978" y3="5.89753962" z3="-3.79580786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21428946" y3="5.24426746" z3="-4.97499053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70069885" y3="6.96047773" z3="-3.97547528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48211033" y3="-2.19728825" z3="-0.28932674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.4544934" y3="-2.98966989" z3="-1.056609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00875936" y3="-2.57954987" z3="0.59983088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09765335" y3="-1.37724469" z3="-0.70547723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.18204651" y3="-1.42277554" z3="-1.14580662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31934127" y3="-0.38172467" z3="-1.4924357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10522783" y3="-1.54827767" z3="-0.94317381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42471405" y3="-2.0764238" z3="-1.99704724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3377,.0514,-.191;7.3827,.1701,.4213;6.6444,.4437,-.3386;4.7279,1.2364,-2.2614;4.387,.4346,-1.1843;2.73,.8441,-3.6637;3.634,1.7474,-3.1359;1.3833,2.5879,-4.6204;1.5628,1.2471,-4.3778;.5048,2.9225,-5.1808;2.9263,-.486,-3.4425;3.0968,.0444,-1.0029;2.4009,-1.0995,-2.0029;.9292,-.9694,-1.831;3.1034,-2.4237,-1.8477;-.1431,-3.6133,.6736;-.0147,-5.2529,-4.7427;-.2434,-4.9954,-3.705;-.8417,-4.3054,-1.0856;.7811,-4.5869,-2.853;-1.5594,-5.0854,-3.2472;-1.8594,-4.735,-1.9332;.494,-4.2566,-1.527;1.814,-4.5061,-3.1996;-2.3579,-5.3995,-3.9227;-2.896,-4.7734,-1.59;-1.0315,-3.8574,.2353;-2.1718,-3.6467,.8808;-3.059,-4.1095,.4464;-2.1668,-3.514,2.3481;-2.2251,-3.3355,5.1463;-3.3631,-3.7204,3.0508;-.9995,-3.2245,3.0706;-1.026,-3.1358,4.4594;-3.3914,-3.6332,4.4399;-4.2778,-3.9596,2.502;-.0399,-3.0899,2.5665;-.0969,-2.9303,4.9984;-4.3296,-3.8055,4.9745;-2.2454,-3.2741,6.238;1.4139,-3.8915,-.623;2.1737,-3.3895,-1.0761;.5225,.2416,-4.7144;-3.0831,-1.7197,.0265;-2.9049,-.9695,1.1881;-1.843,-.3181,1.5189;-.3679,.554,1.218;-.4473,1.4527,-.4087;.983,-.7033,1.3956;-.3518,1.7477,2.6617;-3.8772,-.961,2.0887;-3.6447,-.3495,3.3478;-.2104,.7622,-1.2362;.3276,2.2419,-.4056;-1.427,1.9373,-.5679;1.0119,-1.0677,2.4358;1.9561,-.2414,1.1567;.8572,-1.5451,.6956;-.4067,1.2095,3.6245;.5847,2.3347,2.6575;-1.1936,2.4613,2.6127;-2.7816,-.8076,3.857;-4.5581,-.5237,3.9319;-3.4731,.7328,3.229;4.8378,-.7062,.9912;4.4142,-2.0339,.8519;3.7618,-2.6811,1.8939;3.5503,-1.9879,3.0818;4.0267,-.695,3.2779;4.6786,-.0611,2.2248;4.5204,-2.5314,-.114;3.3668,-3.6903,1.7696;2.6887,-2.5888,4.105;3.8433,-.1856,4.2249;5.02,.9712,2.341;-.794,.4624,-4.2882;-1.7743,-.5049,-4.465;-1.4277,-1.6966,-5.0907;-.142,-1.928,-5.57;.8314,-.9575,-5.3711;-1.0377,1.3858,-3.7565;-2.7926,-.3585,-4.1036;-2.4405,-2.7452,-5.2304;.0873,-2.8682,-6.0714;1.8527,-1.1436,-5.7074;2.3583,-1.8956,5.0474;2.3133,-3.7302,3.9358;-2.2184,-3.6469,-6.0099;-3.4421,-2.6593,-4.548;7.07,1.166,-1.4866;6.1109,1.5537,-2.4671;8.4388,1.4971,-1.6814;8.8504,2.1632,-2.8098;9.1637,1.2005,-.9171;9.9069,2.4074,-2.9515;6.5729,2.2233,-3.6344;7.9046,2.5194,-3.8009;5.8531,2.4943,-4.4101;8.2373,3.0281,-4.71;3.4032,3.1509,-3.3353;2.2891,3.5621,-4.1249;4.2099,4.1628,-2.742;3.9595,5.4954,-2.9683;5.0373,3.8752,-2.0915;4.5956,6.2519,-2.4996;2.0647,4.9477,-4.3532;2.8844,5.8975,-3.7958;1.2143,5.2443,-4.975;2.7007,6.9605,-3.9755;-4.4821,-2.1973,-.2893;-4.4545,-2.9897,-1.0566;-5.0088,-2.5795,.5998;-5.0977,-1.3772,-.7055;-2.182,-1.4228,-1.1458;-2.3193,-.3817,-1.4924;-1.1052,-1.5483,-.9432;-2.4247,-2.0764,-1.997;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650428824369</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000468572774 0.000077650212 0.008594419840 0.002489276213</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030811061 0.000006664 0.000116214 0.000134878 0.000169355 0.000305906 0.000363241 0.000517441 0.000674749 0.000817034 0.000857822 0.000904763 0.001041013 0.001201209 0.001448462 0.001474830 0.001590120 0.001637814 0.001715195 0.001931653 0.001989574 0.002186846 0.002289871 0.002531769 0.002679650 0.002954831 0.002997253 0.003078433 0.003687324 0.004006560 0.004439182 0.004663540 0.004777848 0.005109222 0.005892042 0.006050108 0.006269267 0.006667784 0.006806406 0.007439181 0.007932970 0.008249265 0.008398179 0.009411213 0.009433244 0.009939371 0.010104273 0.011266273 0.011864626 0.012112242 0.012912819 0.013081169 0.014253075 0.014875696 0.015123105 0.015715570 0.015893144 0.016287248 0.016804531 0.017259994 0.018110238 0.018568102 0.018922749 0.019709361 0.020109768 0.020519013 0.021125330 0.021387220 0.021522733 0.023044799 0.023419107 0.026685912 0.026905876 0.028187116 0.028395370 0.029668562 0.030588841 0.031656039 0.033257985 0.033756723 0.034158166 0.035534546 0.036024905 0.037240040 0.038322898 0.039625452 0.040211605 0.041145610 0.042605162 0.044711218 0.045824846 0.047266292 0.048112356 0.049327447 0.050580944 0.051087125 0.051316813 0.051853755 0.052517393 0.052839017 0.052972232 0.053282248 0.054924561 0.055015868 0.056299078 0.056494235 0.056623789 0.057079952 0.057252126 0.059263058 0.060659517 0.061092735 0.061950997 0.062422791 0.063452712 0.064547351 0.065337955 0.066206810 0.066648438 0.068636603 0.069347365 0.070292668 0.072945402 0.074453123 0.074805038 0.076538221 0.079357973 0.084584855 0.087009424 0.087315069 0.087791750 0.089923831 0.090751567 0.091740174 0.094363569 0.095906864 0.096240161 0.096811894 0.097881790 0.098858595 0.100261096 0.101008561 0.102503120 0.103303281 0.103780637 0.104488426 0.104688613 0.105517204 0.106374127 0.107129655 0.108254063 0.110210063 0.111232850 0.112623237 0.113578895 0.115165359 0.116298661 0.116890722 0.118796347 0.121405320 0.122577623 0.123914230 0.125583752 0.126365676 0.126485481 0.126829615 0.127994978 0.132214313 0.135186770 0.135966311 0.143251503 0.144138715 0.147262120 0.147551325 0.149818738 0.150812661 0.154641784 0.154781655 0.156766862 0.161342466 0.162068772 0.173930214 0.174508753 0.182337684 0.185855496 0.186614983 0.189735054 0.190480104 0.194534732 0.196008417 0.199150036 0.200465665 0.205309841 0.207227185 0.207613187 0.210308306 0.216878866 0.217544128 0.218025840 0.220898900 0.221526363 0.225459839 0.226815977 0.232439239 0.235278783 0.235796649 0.236134616 0.244819839 0.256145784 0.257405168 0.264045730 0.269959815 0.280791010 0.284007065 0.286423688 0.291984851 0.297097564 0.304639574 0.306050423 0.307402603 0.314749110 0.316856383 0.317500519 0.322274521 0.330184302 0.333313099 0.351848844 0.353064604 0.355646561 0.356130963 0.360115872 0.363212715 0.364630817 0.383852933 0.386089049 0.392346552 0.410717309 0.426169356 0.431330988 0.462543343 0.469599646 0.479254010 0.484644818 0.484726737 0.487488658 0.491525822 0.509967485 0.515410455 0.535190393 0.569598859 0.575442557 0.591105842 0.594368932 0.607560994 0.608517923 0.645119152 0.648078553 0.649921991 0.674635225 0.678405094 0.688350573 0.693538006 0.694312173 0.700435587 0.705956255 0.718598796 0.742349748 0.751471231 0.759490031 0.772230305 0.774868850 0.779841167 0.811223798 0.816816870 0.820632892 0.823330122 0.823832225 0.832543331 0.835151722 0.838384816 0.842829795 0.845976952 0.847939486 0.850401112 0.859933341 0.866044922 0.869321865 0.875070623 0.886685024 0.889404359 0.890026148 0.900916436 0.901193604 0.904553957 0.924296819 0.928353283 0.936943248 0.938319003 0.966533387 0.978211235 0.987764704 1.002140593 1.020529197 1.028870075 1.042991138 1.053005045 1.059243724 1.069554274 1.087061221 1.089216179 1.105736831 1.112176340 1.113199409 1.130093662 1.136599905 1.141469387 1.145783153 1.176922301 1.179249816 1.182021498 1.187771804 1.191707038 1.198900341 1.225460322 1.229104644 1.275093340 1.303145644 1.321495508 1.328535542 1.333542841 1.336741715 1.337615588 1.341841204 1.344823191 1.345581169 1.360006210 1.379794460 1.383562870 1.386347435 1.403319457 1.421426545 1.430328256 1.551526645 1.687449739 1.777136008</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">343</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33931143" y3="0.04963281" z3="-0.1921954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38488885" y3="0.16709958" z3="0.41859997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64600517" y3="0.44114927" z3="-0.34070666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72844601" y3="1.23544871" z3="-2.26175385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38795778" y3="0.43348553" z3="-1.18475801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72960734" y3="0.84478655" z3="-3.66292278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63413516" y3="1.74740298" z3="-3.13515015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38223196" y3="2.58966923" z3="-4.61673881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56201777" y3="1.24866777" z3="-4.37585021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50333559" y3="2.92491174" z3="-5.17617062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92597153" y3="-0.48552641" z3="-3.44271607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09783469" y3="0.04342577" z3="-1.00283125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40113919" y3="-1.09964908" z3="-2.00324667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92952095" y3="-0.96920151" z3="-1.83059181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10320557" y3="-2.42422582" z3="-1.84924974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14234189" y3="-3.61584188" z3="0.67448043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01685996" y3="-5.2508463" z3="-4.7432598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24481371" y3="-4.99489326" z3="-3.7050434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84136357" y3="-4.30811804" z3="-1.08446616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.77995603" y3="-4.58602467" z3="-2.85359596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.56028968" y3="-5.0868862" z3="-3.24611018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85936835" y3="-4.73827299" z3="-1.9314339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49373313" y3="-4.25741286" z3="-1.52700017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81244052" y3="-4.50370829" z3="-3.20119422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.3593672" y3="-5.40088523" z3="-3.92119989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89557276" y3="-4.77844067" z3="-1.58719045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03063157" y3="-3.86061217" z3="0.23667452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17089375" y3="-3.64842559" z3="0.88199094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.0583423" y3="-4.11187745" z3="0.44858126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16559741" y3="-3.51333564" z3="2.34901613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22313424" y3="-3.32945228" z3="5.14696836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36145132" y3="-3.71921751" z3="3.05252237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99841948" y3="-3.22143574" z3="3.07057317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02449085" y3="-3.1301308" z3="4.45921505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.38931043" y3="-3.62946424" z3="4.4414313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27664294" y3="-3.95931954" z3="2.50429543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0390743" y3="-3.08701065" z3="2.56585955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09512671" y3="-2.92344512" z3="4.99771326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32717912" y3="-3.80128186" z3="4.97668345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24298893" y3="-3.2661686" z3="6.23854312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41414047" y3="-3.89194249" z3="-0.62363974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.1737183" y3="-3.39000167" z3="-1.07725979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52193769" y3="0.24304517" z3="-4.71344424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08127944" y3="-1.72302158" z3="0.02441662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90512424" y3="-0.97164408" z3="1.18552134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8437542" y3="-0.31997459" z3="1.51725361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37008378" y3="0.55504257" z3="1.21783805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.44941267" y3="1.45261068" z3="-0.409535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98327933" y3="-0.69925249" z3="1.39767517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35857505" y3="1.7496812" z3="2.6607933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.87885762" y3="-0.96243445" z3="2.08467179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.64906841" y3="-0.34827071" z3="3.34284626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21021354" y3="0.76186832" z3="-1.23618391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32402665" y3="2.24334204" z3="-0.40600263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.42978179" y3="1.93508116" z3="-0.57030914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01256784" y3="-1.0627241" z3="2.43832811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95570554" y3="-0.23597272" z3="1.15856874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85903544" y3="-1.54209044" z3="0.69852232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41420414" y3="1.21202804" z3="3.62392016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57694421" y3="2.33823348" z3="2.65787765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20145342" y3="2.46171937" z3="2.60978621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78672885" y3="-0.80469544" z3="3.85460172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56348866" y3="-0.52192648" z3="3.9255233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.47813434" y3="0.7339852" z3="3.22217477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.8395257" y3="-0.70790623" z3="0.99006251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41302172" y3="-2.03471574" z3="0.85032731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76053353" y3="-2.68130418" z3="1.89268875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55157294" y3="-1.98824962" z3="3.08144578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0306924" y3="-0.6964329" z3="3.27776913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68291385" y3="-0.06326884" z3="2.22445245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51822192" y3="-2.53225364" z3="-0.11517922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36397495" y3="-3.68977171" z3="1.76844329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6898666" y3="-2.58818463" z3="4.10507471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84824874" y3="-0.18686131" z3="4.22436059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02623242" y3="0.96839572" z3="2.34072992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79477312" y3="0.46359395" z3="-4.28770498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77482564" y3="-0.50402686" z3="-4.46501576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42767443" y3="-1.69578409" z3="-5.09052943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14169844" y3="-1.92672541" z3="-5.56912739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83132549" y3="-0.95596983" z3="-5.36992463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03895286" y3="1.38693203" z3="-3.75615637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7932175" y3="-0.35790609" z3="-4.10402626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.43993223" y3="-2.74475308" z3="-5.23020555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08811581" y3="-2.86703793" z3="-6.0704447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85281325" y3="-1.14183898" z3="-5.70579829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.36084439" y3="-1.89464158" z3="5.04770091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31292231" y3="-3.72915779" z3="3.93597779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2171798" y3="-3.64671943" z3="-6.00918337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44194339" y3="-2.65892927" z3="-4.54834207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07114916" y3="1.1635237" z3="-1.48877984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11141436" y3="1.55238775" z3="-2.46823162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44001407" y3="1.49382492" z3="-1.68479623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8509721" y3="2.15993319" z3="-2.81325012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16550866" y3="1.19610562" z3="-0.92141958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9075089" y3="2.40332863" z3="-2.95589538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5727435" y3="2.22268645" z3="-3.63541352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90440931" y3="2.51761392" z3="-3.80313106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85230203" y3="2.49476594" z3="-4.41028497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23663076" y3="3.0269681" z3="-4.71220546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40311047" y3="3.15115383" z3="-3.33267703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.28831725" y3="3.56320916" z3="-4.1208694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21001898" y3="4.16252022" z3="-2.73847884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.95931087" y3="5.49529493" z3="-2.96281124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.03808137" y3="3.87406721" z3="-2.08913827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.59570679" y3="6.25111946" z3="-2.49377125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06340405" y3="4.94913984" z3="-4.34693174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88341055" y3="5.89830308" z3="-3.78891253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.2124168" y3="5.24645602" z3="-4.9675668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.69931497" y3="6.96146942" z3="-3.96688086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4795954" y3="-2.20128495" z3="-0.29319302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45048691" y3="-2.99382865" z3="-1.06018031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00729018" y3="-2.58354777" z3="0.5953922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09490043" y3="-1.38166674" z3="-0.71046629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17873264" y3="-1.42608523" z3="-1.14665176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31613575" y3="-0.38544641" z3="-1.49382867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.1020738" y3="-1.55113635" z3="-0.94264679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42016866" y3="-2.0799469" z3="-1.99813077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3393,.0496,-.1922;7.3849,.1671,.4186;6.646,.4411,-.3407;4.7284,1.2354,-2.2618;4.388,.4335,-1.1848;2.7296,.8448,-3.6629;3.6341,1.7474,-3.1352;1.3822,2.5897,-4.6167;1.562,1.2487,-4.3759;.5033,2.9249,-5.1762;2.926,-.4855,-3.4427;3.0978,.0434,-1.0028;2.4011,-1.0996,-2.0032;.9295,-.9692,-1.8306;3.1032,-2.4242,-1.8492;-.1423,-3.6158,.6745;-.0169,-5.2508,-4.7433;-.2448,-4.9949,-3.705;-.8414,-4.3081,-1.0845;.78,-4.586,-2.8536;-1.5603,-5.0869,-3.2461;-1.8594,-4.7383,-1.9314;.4937,-4.2574,-1.527;1.8124,-4.5037,-3.2012;-2.3594,-5.4009,-3.9212;-2.8956,-4.7784,-1.5872;-1.0306,-3.8606,.2367;-2.1709,-3.6484,.882;-3.0583,-4.1119,.4486;-2.1656,-3.5133,2.349;-2.2231,-3.3295,5.147;-3.3615,-3.7192,3.0525;-.9984,-3.2214,3.0706;-1.0245,-3.1301,4.4592;-3.3893,-3.6295,4.4414;-4.2766,-3.9593,2.5043;-.0391,-3.087,2.5659;-.0951,-2.9234,4.9977;-4.3272,-3.8013,4.9767;-2.243,-3.2662,6.2385;1.4141,-3.8919,-.6236;2.1737,-3.39,-1.0773;.5219,.243,-4.7134;-3.0813,-1.723,.0244;-2.9051,-.9716,1.1855;-1.8438,-.32,1.5173;-.3701,.555,1.2178;-.4494,1.4526,-.4095;.9833,-.6993,1.3977;-.3586,1.7497,2.6608;-3.8789,-.9624,2.0847;-3.6491,-.3483,3.3428;-.2102,.7619,-1.2362;.324,2.2433,-.406;-1.4298,1.9351,-.5703;1.0126,-1.0627,2.4383;1.9557,-.236,1.1586;.859,-1.5421,.6985;-.4142,1.212,3.6239;.5769,2.3382,2.6579;-1.2015,2.4617,2.6098;-2.7867,-.8047,3.8546;-4.5635,-.5219,3.9255;-3.4781,.734,3.2222;4.8395,-.7079,.9901;4.413,-2.0347,.8503;3.7605,-2.6813,1.8927;3.5516,-1.9882,3.0814;4.0307,-.6964,3.2778;4.6829,-.0633,2.2245;4.5182,-2.5323,-.1152;3.364,-3.6898,1.7684;2.6899,-2.5882,4.1051;3.8482,-.1869,4.2244;5.0262,.9684,2.3407;-.7948,.4636,-4.2877;-1.7748,-.504,-4.465;-1.4277,-1.6958,-5.0905;-.1417,-1.9267,-5.5691;.8313,-.956,-5.3699;-1.039,1.3869,-3.7562;-2.7932,-.3579,-4.104;-2.4399,-2.7448,-5.2302;.0881,-2.867,-6.0704;1.8528,-1.1418,-5.7058;2.3608,-1.8946,5.0477;2.3129,-3.7292,3.936;-2.2172,-3.6467,-6.0092;-3.4419,-2.6589,-4.5483;7.0711,1.1635,-1.4888;6.1114,1.5524,-2.4682;8.44,1.4938,-1.6848;8.851,2.1599,-2.8133;9.1655,1.1961,-.9214;9.9075,2.4033,-2.9559;6.5727,2.2227,-3.6354;7.9044,2.5176,-3.8031;5.8523,2.4948,-4.4103;8.2366,3.027,-4.7122;3.4031,3.1512,-3.3327;2.2883,3.5632,-4.1209;4.21,4.1625,-2.7385;3.9593,5.4953,-2.9628;5.0381,3.8741,-2.0891;4.5957,6.2511,-2.4938;2.0634,4.9491,-4.3469;2.8834,5.8983,-3.7889;1.2124,5.2465,-4.9676;2.6993,6.9615,-3.9669;-4.4796,-2.2013,-.2932;-4.4505,-2.9938,-1.0602;-5.0073,-2.5835,.5954;-5.0949,-1.3817,-.7105;-2.1787,-1.4261,-1.1467;-2.3161,-.3854,-1.4938;-1.1021,-1.5511,-.9426;-2.4202,-2.0799,-1.9981;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650429691967</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000209022844 0.000037214417 0.013890044827 0.003628769281</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002152874732 0.001435249822</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030811469 -0.000046430 0.000118177 0.000162870 0.000197144 0.000297764 0.000360230 0.000512808 0.000682410 0.000823354 0.000860624 0.000908482 0.001044223 0.001201117 0.001447550 0.001473258 0.001587959 0.001634215 0.001714845 0.001930349 0.001991935 0.002186320 0.002289478 0.002531239 0.002677669 0.002952439 0.002996856 0.003078105 0.003687307 0.004002289 0.004439131 0.004665075 0.004781084 0.005110271 0.005886426 0.006051072 0.006269294 0.006667185 0.006803611 0.007438514 0.007932066 0.008249222 0.008398923 0.009406760 0.009433107 0.009937488 0.010105917 0.011267035 0.011862068 0.012104609 0.012908375 0.013078008 0.014235222 0.014870325 0.015104624 0.015710404 0.015891675 0.016280872 0.016807793 0.017246270 0.018102119 0.018548765 0.018924365 0.019709662 0.020106997 0.020516864 0.021122079 0.021386082 0.021516825 0.023042574 0.023418244 0.026688335 0.026905800 0.028193088 0.028395969 0.029670284 0.030590420 0.031657351 0.033258088 0.033757033 0.034158531 0.035501593 0.036003639 0.037239891 0.038314803 0.039626296 0.040211835 0.041145647 0.042605994 0.044710830 0.045826103 0.047267675 0.048112944 0.049329297 0.050581094 0.051087133 0.051316976 0.051854600 0.052517793 0.052839800 0.052972367 0.053282851 0.054924774 0.055017728 0.056301920 0.056497389 0.056624171 0.057080311 0.057252238 0.059263704 0.060659917 0.061093693 0.061951224 0.062422917 0.063452489 0.064547923 0.065338018 0.066206095 0.066648684 0.068639089 0.069347513 0.070292600 0.072948308 0.074448044 0.074804908 0.076537780 0.079359381 0.084584891 0.087009260 0.087314934 0.087792337 0.089925714 0.090752887 0.091743433 0.094362686 0.095910376 0.096258660 0.096850779 0.097882037 0.098860266 0.100261983 0.101025989 0.102504745 0.103307450 0.103790671 0.104490519 0.104695403 0.105518843 0.106373759 0.107130147 0.108252078 0.110210829 0.111233385 0.112623750 0.113580207 0.115166370 0.116298831 0.116890888 0.118799273 0.121405429 0.122578367 0.123920385 0.125585593 0.126367131 0.126489974 0.126829934 0.127998170 0.132214558 0.135188377 0.135965920 0.143252949 0.144139391 0.147262325 0.147545210 0.149813810 0.150762149 0.154636730 0.154784962 0.156766531 0.161343843 0.162069238 0.173933838 0.174510938 0.182340456 0.185871388 0.186615606 0.189735405 0.190480546 0.194534999 0.196014359 0.199154238 0.200465603 0.205310988 0.207228464 0.207614745 0.210308378 0.216879204 0.217547957 0.218027119 0.220899151 0.221539396 0.225460493 0.226817506 0.232439625 0.235281601 0.235798885 0.236135359 0.244821259 0.256145377 0.257405318 0.264046050 0.269958840 0.280791812 0.284007345 0.286424297 0.291984734 0.297098532 0.304640293 0.306050672 0.307402162 0.314751229 0.316856516 0.317501512 0.322274810 0.330184232 0.333316131 0.351849188 0.353064619 0.355648927 0.356132135 0.360114921 0.363213448 0.364630862 0.383841216 0.386090204 0.392348667 0.410717616 0.426170189 0.431331929 0.462544053 0.469601298 0.479254195 0.484645649 0.484727660 0.487482696 0.491525999 0.509969827 0.515405832 0.535183812 0.569599061 0.575442981 0.591088420 0.594370870 0.607562278 0.608517152 0.645118514 0.648086025 0.649922127 0.674637164 0.678402874 0.688355501 0.693538516 0.694318564 0.700436750 0.706000305 0.718606308 0.742351157 0.751472219 0.759490180 0.772230760 0.774869112 0.779841378 0.811225722 0.816818844 0.820632924 0.823329377 0.823833246 0.832547548 0.835156690 0.838386669 0.842830182 0.845977904 0.847942824 0.850405494 0.859935741 0.866045436 0.869337486 0.875082959 0.886686908 0.889406411 0.890029176 0.900915783 0.901194216 0.904563269 0.924297669 0.928353954 0.936944947 0.938321540 0.966540123 0.978248233 0.987794544 1.002148139 1.020536932 1.028872337 1.043003015 1.053006474 1.059247961 1.069565139 1.087061313 1.089216276 1.105739884 1.112181956 1.113202812 1.130104324 1.136601865 1.141474926 1.145785859 1.176923290 1.179249996 1.182025511 1.187776371 1.191707997 1.198903434 1.225474768 1.229104846 1.275102442 1.303147171 1.321496530 1.328540711 1.333544807 1.336740882 1.337599214 1.341828180 1.344829034 1.345585290 1.360006037 1.379794735 1.383563024 1.386350815 1.403154737 1.421428201 1.430302457 1.551526657 1.687458577 1.777139653</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">344</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33908169" y3="0.05370314" z3="-0.191523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38498606" y3="0.16935065" z3="0.41857791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64620004" y3="0.4432972" z3="-0.34088451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72917906" y3="1.23721341" z3="-2.26267545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38794752" y3="0.43736058" z3="-1.18434792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73020756" y3="0.84586756" z3="-3.66335003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63545271" y3="1.74864024" z3="-3.13711982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38459457" y3="2.5901041" z3="-4.62082359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56315109" y3="1.24943385" z3="-4.37727668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50608305" y3="2.92503814" z3="-5.18104158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92537684" y3="-0.48418679" z3="-3.44081268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09745846" y3="0.04873485" z3="-1.00174936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40039148" y3="-1.09571509" z3="-2.00032222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92880807" y3="-0.96468232" z3="-1.82789988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10235" y3="-2.42013092" z3="-1.84435438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14368618" y3="-3.61598693" z3="0.67477567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01187672" y3="-5.24792443" z3="-4.74345108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24116681" y3="-4.99220119" z3="-3.70547498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84095215" y3="-4.30656343" z3="-1.08539725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78251004" y3="-4.58325385" z3="-2.85273102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55719918" y3="-5.08458135" z3="-3.24816047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85794535" y3="-4.73644882" z3="-1.933745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4946344" y3="-4.25516862" z3="-1.5263652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81537212" y3="-4.50056846" z3="-3.19906694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35538589" y3="-5.39864721" z3="-3.9242637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89453275" y3="-4.77700949" z3="-1.59076727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03153198" y3="-3.86045289" z3="0.2359905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17224233" y3="-3.6496064" z3="0.88090878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05938332" y3="-4.11254075" z3="0.44625473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16765076" y3="-3.51671362" z3="2.34812879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22629347" y3="-3.33719257" z3="5.14632614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36368456" y3="-3.72409658" z3="3.05083252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00086263" y3="-3.22553239" z3="3.07059258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02748094" y3="-3.13629583" z3="4.45935075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39206475" y3="-3.63657619" z3="4.43987502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27863259" y3="-3.96354541" z3="2.50185841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04132438" y3="-3.09006334" z3="2.56651279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09834171" y3="-2.92988031" z3="4.99838649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.33008516" y3="-3.80956935" z3="4.97449697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24662127" y3="-3.27560687" z3="6.23798857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41379934" y3="-3.88978043" z3="-0.62173498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17341433" y3="-3.38649902" z3="-1.07408037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52243069" y3="0.24398301" z3="-4.71341187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0827421" y3="-1.72290676" z3="0.02583038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90702854" y3="-0.97336794" z3="1.1881649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.8458495" y3="-0.32210024" z3="1.5214177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37163923" y3="0.55228033" z3="1.22298312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45195763" y3="1.45417574" z3="-0.40195595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.9812321" y3="-0.70313171" z3="1.39785976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.3574951" y3="1.74248203" z3="2.66951618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88108112" y3="-0.96567126" z3="2.08699309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65174324" y3="-0.35364406" z3="3.3462829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21313221" y3="0.76554151" z3="-1.23046808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32151287" y3="2.2448444" z3="-0.39683276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43238646" y3="1.93706294" z3="-0.56100548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01170785" y3="-1.06893673" z3="2.43761718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95342573" y3="-0.2393738" z3="1.15871501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.8560208" y3="-1.5442083" z3="0.69679885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41248539" y3="1.20169888" z3="3.6309436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57862465" y3="2.33005983" z3="2.66741607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.1997257" y3="2.4554907" z3="2.62187644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78953284" y3="-0.81086187" z3="3.85753141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56633091" y3="-0.52838037" z3="3.92835881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48083692" y3="0.72882749" z3="3.22752803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83884115" y3="-0.70285493" z3="0.99125067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41551527" y3="-2.03082256" z3="0.85286142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76301565" y3="-2.67736645" z3="1.89527457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55074581" y3="-1.98304956" z3="3.08270714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02652551" y3="-0.68979064" z3="3.27775086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67885864" y3="-0.05670895" z3="2.22443661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52324459" y3="-2.52954166" z3="-0.11169494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36889365" y3="-3.68689667" z3="1.77198973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68857899" y3="-2.58332251" z3="4.10578767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84131034" y3="-0.17914562" z3="4.22319147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.01962882" y3="0.97590469" z3="2.33964534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79390389" y3="0.46534538" z3="-4.28700492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77456171" y3="-0.50180421" z3="-4.46339842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42835861" y3="-1.69390339" z3="-5.08888489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14272765" y3="-1.92576765" z3="-5.56791383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83094112" y3="-0.95549497" z3="-5.36940505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03732837" y3="1.38903792" z3="-3.75566402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79271212" y3="-0.35503116" z3="-4.10202216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44135963" y3="-2.74224194" z3="-5.22808096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08625283" y3="-2.86636523" z3="-6.06896128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85217115" y3="-1.14202851" z3="-5.70569842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35604292" y3="-1.88891956" z3="5.04656697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31472688" y3="-3.72551204" z3="3.93797773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21966592" y3="-3.64428276" z3="-6.00726162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44292988" y3="-2.65582345" z3="-4.54559879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07196108" y3="1.16352003" z3="-1.49008605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11251135" y3="1.55213721" z3="-2.46990523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44124091" y3="1.49161748" z3="-1.68702581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85282289" y3="2.1551664" z3="-2.81675107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16652232" y3="1.1940971" z3="-0.92337714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90967693" y3="2.39675262" z3="-2.9601463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57447891" y3="2.21988746" z3="-3.63833585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90649482" y3="2.51253557" z3="-3.80696622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85420776" y3="2.49163973" z3="-4.41347956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23918521" y3="3.01977742" z3="-4.71702263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40587765" y3="3.15219985" z3="-3.33765164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29163632" y3="3.56372527" z3="-4.12690766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21382999" y3="4.16403229" z3="-2.74563188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96472409" y3="5.49655181" z3="-2.97312955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04149986" y3="3.87614137" z3="-2.09554218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.6019644" y3="6.25274022" z3="-2.50580108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06830699" y3="4.94939208" z3="-4.35614212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88937377" y3="5.89889476" z3="-3.80026757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21772743" y3="5.24625125" z3="-4.97755369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70656687" y3="6.96184455" z3="-3.9807709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48086839" y3="-2.20092729" z3="-0.29293002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45136281" y3="-2.99251311" z3="-1.06089771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00889093" y3="-2.58433546" z3="0.59496272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09605988" y3="-1.3808434" z3="-0.70944026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1799017" y3="-1.4244196" z3="-1.14460338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31740381" y3="-0.38346369" z3="-1.49071854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10326968" y3="-1.54954172" z3="-0.9405159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42097585" y3="-2.07739394" z3="-1.99684943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3391,.0537,-.1915;7.385,.1694,.4186;6.6462,.4433,-.3409;4.7292,1.2372,-2.2627;4.3879,.4374,-1.1843;2.7302,.8459,-3.6634;3.6355,1.7486,-3.1371;1.3846,2.5901,-4.6208;1.5632,1.2494,-4.3773;.5061,2.925,-5.181;2.9254,-.4842,-3.4408;3.0975,.0487,-1.0017;2.4004,-1.0957,-2.0003;.9288,-.9647,-1.8279;3.1023,-2.4201,-1.8444;-.1437,-3.616,.6748;-.0119,-5.2479,-4.7435;-.2412,-4.9922,-3.7055;-.841,-4.3066,-1.0854;.7825,-4.5833,-2.8527;-1.5572,-5.0846,-3.2482;-1.8579,-4.7364,-1.9337;.4946,-4.2552,-1.5264;1.8154,-4.5006,-3.1991;-2.3554,-5.3986,-3.9243;-2.8945,-4.777,-1.5908;-1.0315,-3.8605,.236;-2.1722,-3.6496,.8809;-3.0594,-4.1125,.4463;-2.1677,-3.5167,2.3481;-2.2263,-3.3372,5.1463;-3.3637,-3.7241,3.0508;-1.0009,-3.2255,3.0706;-1.0275,-3.1363,4.4594;-3.3921,-3.6366,4.4399;-4.2786,-3.9635,2.5019;-.0413,-3.0901,2.5665;-.0983,-2.9299,4.9984;-4.3301,-3.8096,4.9745;-2.2466,-3.2756,6.238;1.4138,-3.8898,-.6217;2.1734,-3.3865,-1.0741;.5224,.244,-4.7134;-3.0827,-1.7229,.0258;-2.907,-.9734,1.1882;-1.8458,-.3221,1.5214;-.3716,.5523,1.223;-.452,1.4542,-.402;.9812,-.7031,1.3979;-.3575,1.7425,2.6695;-3.8811,-.9657,2.087;-3.6517,-.3536,3.3463;-.2131,.7655,-1.2305;.3215,2.2448,-.3968;-1.4324,1.9371,-.561;1.0117,-1.0689,2.4376;1.9534,-.2394,1.1587;.856,-1.5442,.6968;-.4125,1.2017,3.6309;.5786,2.3301,2.6674;-1.1997,2.4555,2.6219;-2.7895,-.8109,3.8575;-4.5663,-.5284,3.9284;-3.4808,.7288,3.2275;4.8388,-.7029,.9913;4.4155,-2.0308,.8529;3.763,-2.6774,1.8953;3.5507,-1.983,3.0827;4.0265,-.6898,3.2778;4.6789,-.0567,2.2244;4.5232,-2.5295,-.1117;3.3689,-3.6869,1.772;2.6886,-2.5833,4.1058;3.8413,-.1791,4.2232;5.0196,.9759,2.3396;-.7939,.4653,-4.287;-1.7746,-.5018,-4.4634;-1.4284,-1.6939,-5.0889;-.1427,-1.9258,-5.5679;.8309,-.9555,-5.3694;-1.0373,1.389,-3.7557;-2.7927,-.355,-4.102;-2.4414,-2.7422,-5.2281;.0863,-2.8664,-6.069;1.8522,-1.142,-5.7057;2.356,-1.8889,5.0466;2.3147,-3.7255,3.938;-2.2197,-3.6443,-6.0073;-3.4429,-2.6558,-4.5456;7.072,1.1635,-1.4901;6.1125,1.5521,-2.4699;8.4412,1.4916,-1.687;8.8528,2.1552,-2.8168;9.1665,1.1941,-.9234;9.9097,2.3968,-2.9601;6.5745,2.2199,-3.6383;7.9065,2.5125,-3.807;5.8542,2.4916,-4.4135;8.2392,3.0198,-4.717;3.4059,3.1522,-3.3377;2.2916,3.5637,-4.1269;4.2138,4.164,-2.7456;3.9647,5.4966,-2.9731;5.0415,3.8761,-2.0955;4.602,6.2527,-2.5058;2.0683,4.9494,-4.3561;2.8894,5.8989,-3.8003;1.2177,5.2463,-4.9776;2.7066,6.9618,-3.9808;-4.4809,-2.2009,-.2929;-4.4514,-2.9925,-1.0609;-5.0089,-2.5843,.595;-5.0961,-1.3808,-.7094;-2.1799,-1.4244,-1.1446;-2.3174,-.3835,-1.4907;-1.1033,-1.5495,-.9405;-2.421,-2.0774,-1.9968;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650429770594</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000291630337 0.000051515354 0.006308763111 0.001353186847</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001543049346 0.001028699564</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030811099 0.000049765 0.000121650 0.000157005 0.000188577 0.000293127 0.000366883 0.000509123 0.000597826 0.000824018 0.000860693 0.000902703 0.001022803 0.001200520 0.001444926 0.001469038 0.001586631 0.001630151 0.001711533 0.001926490 0.001989614 0.002186854 0.002286266 0.002530569 0.002677386 0.002948804 0.002996018 0.003075149 0.003687337 0.003998300 0.004436521 0.004666627 0.004785566 0.005109877 0.005857226 0.006049829 0.006268137 0.006662519 0.006792241 0.007431494 0.007926941 0.008250188 0.008399684 0.009394105 0.009430217 0.009930545 0.010107503 0.011266670 0.011846100 0.012088439 0.012901376 0.013074759 0.014208685 0.014857039 0.015078071 0.015695847 0.015886770 0.016266822 0.016808302 0.017232724 0.018093222 0.018527409 0.018925902 0.019710954 0.020104983 0.020513148 0.021115521 0.021385957 0.021509982 0.023036880 0.023416168 0.026692305 0.026905781 0.028198487 0.028397685 0.029672167 0.030592229 0.031657735 0.033255856 0.033757616 0.034157662 0.035446403 0.035968310 0.037239311 0.038299235 0.039621690 0.040214920 0.041145551 0.042607144 0.044710339 0.045827222 0.047268184 0.048113371 0.049331380 0.050580907 0.051086236 0.051316980 0.051855372 0.052518295 0.052840663 0.052972531 0.053283336 0.054924842 0.055019053 0.056304287 0.056500973 0.056625020 0.057080338 0.057252498 0.059264946 0.060659986 0.061094271 0.061951832 0.062422774 0.063452493 0.064548458 0.065337921 0.066205088 0.066649059 0.068641845 0.069348174 0.070292292 0.072951394 0.074444495 0.074804841 0.076537891 0.079361046 0.084585472 0.087008939 0.087315082 0.087792901 0.089927714 0.090754205 0.091746610 0.094362714 0.095913447 0.096276418 0.096888385 0.097882261 0.098861548 0.100262764 0.101043355 0.102505474 0.103311675 0.103800396 0.104492172 0.104702308 0.105521028 0.106373154 0.107129755 0.108250408 0.110212254 0.111234123 0.112623817 0.113581393 0.115167488 0.116298957 0.116891307 0.118801538 0.121405459 0.122580436 0.123925990 0.125587810 0.126369041 0.126494962 0.126829922 0.128000924 0.132214486 0.135189941 0.135965915 0.143254013 0.144140017 0.147262647 0.147535630 0.149809733 0.150701126 0.154628510 0.154787313 0.156767069 0.161341135 0.162070515 0.173936907 0.174512413 0.182343270 0.185887172 0.186616238 0.189735467 0.190480588 0.194535026 0.196019367 0.199158833 0.200465748 0.205312201 0.207229748 0.207617257 0.210308527 0.216879227 0.217551295 0.218027574 0.220899436 0.221556807 0.225460917 0.226818784 0.232439998 0.235283787 0.235801419 0.236136155 0.244823023 0.256145044 0.257405611 0.264046555 0.269957344 0.280792482 0.284008141 0.286424854 0.291984288 0.297099258 0.304641552 0.306050796 0.307402494 0.314753560 0.316856136 0.317501979 0.322274914 0.330180527 0.333320054 0.351849019 0.353064522 0.355652280 0.356134692 0.360113392 0.363214490 0.364631160 0.383819469 0.386090742 0.392349732 0.410718835 0.426170971 0.431332756 0.462544808 0.469597572 0.479254126 0.484646620 0.484728793 0.487477237 0.491526227 0.509973068 0.515391980 0.535167843 0.569597608 0.575442421 0.591060053 0.594371603 0.607563368 0.608517386 0.645118407 0.648092157 0.649922521 0.674637897 0.678395632 0.688359119 0.693536859 0.694324737 0.700436227 0.706035512 0.718610708 0.742351350 0.751472493 0.759490708 0.772230900 0.774869705 0.779842126 0.811227166 0.816820480 0.820633226 0.823329402 0.823833080 0.832550760 0.835162022 0.838387448 0.842830859 0.845979314 0.847946891 0.850408624 0.859938530 0.866045800 0.869350969 0.875088961 0.886689125 0.889409322 0.890031282 0.900915083 0.901193936 0.904571177 0.924298427 0.928354363 0.936947177 0.938323300 0.966545485 0.978277729 0.987816887 1.002153402 1.020542191 1.028874008 1.043011757 1.053007168 1.059252468 1.069573043 1.087061493 1.089217950 1.105743869 1.112184506 1.113205375 1.130122804 1.136603954 1.141478022 1.145788501 1.176923942 1.179250049 1.182029543 1.187783464 1.191708876 1.198905895 1.225484715 1.229105322 1.275069728 1.303147202 1.321497221 1.328543883 1.333539132 1.336739319 1.337565409 1.341802877 1.344834309 1.345593411 1.360005248 1.379795144 1.383563442 1.386356505 1.402825577 1.421431605 1.430247700 1.551526559 1.687464924 1.777144037</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">345</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33960907" y3="0.05249583" z3="-0.19232013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38564167" y3="0.16760659" z3="0.41740075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64685888" y3="0.44211808" z3="-0.34178039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72961343" y3="1.23693967" z3="-2.26292927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38844017" y3="0.43656341" z3="-1.18489388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73041131" y3="0.84621204" z3="-3.66346368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63564937" y3="1.74883931" z3="-3.13677823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38424777" y3="2.59099767" z3="-4.61915637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56309359" y3="1.25011982" z3="-4.3768353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50546486" y3="2.92624944" z3="-5.17877824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92575252" y3="-0.48399004" z3="-3.44166062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09795006" y3="0.04796663" z3="-1.0023035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40076718" y3="-1.09605818" z3="-2.001335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92919393" y3="-0.96491414" z3="-1.82889722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10255862" y3="-2.42061145" z3="-1.84575302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14303982" y3="-3.61725988" z3="0.67524198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01450873" y3="-5.24691637" z3="-4.74399766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24301111" y3="-4.99211539" z3="-3.7055845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84109976" y3="-4.30822319" z3="-1.08457609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78109115" y3="-4.58274888" z3="-2.85355853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55846291" y3="-5.08612086" z3="-3.24702388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85834509" y3="-4.73890819" z3="-1.93211063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.4941174" y3="-4.25562178" z3="-1.52672384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81354148" y3="-4.49885352" z3="-3.20086756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35688181" y3="-5.40070396" z3="-3.92253627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89459934" y3="-4.78062003" z3="-1.58811668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03117968" y3="-3.86191354" z3="0.23686231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17177374" y3="-3.65050496" z3="0.881814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05886089" y3="-4.11394223" z3="0.44775886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16699881" y3="-3.51629862" z3="2.34892738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22550607" y3="-3.33309126" z3="5.14691093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36305427" y3="-3.7227223" z3="3.05197094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-1.00004466" y3="-3.22444025" z3="3.07099624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02660144" y3="-3.13335993" z3="4.45963181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39140365" y3="-3.63333126" z3="4.44089041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27777565" y3="-3.96324283" z3="2.50342113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04056477" y3="-3.08962172" z3="2.56669404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09764109" y3="-2.92598972" z3="4.9983487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32940212" y3="-3.80558977" z3="4.97579086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24585309" y3="-3.26987634" z3="6.23846753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41369086" y3="-3.88983505" z3="-0.62272057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17319936" y3="-3.38676596" z3="-1.0754566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52238078" y3="0.24485702" z3="-4.71328923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.0819145" y3="-1.7248266" z3="0.02493224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90722193" y3="-0.97428834" z3="1.1868642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84652254" y3="-0.32246918" z3="1.52046517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37194895" y3="0.55158501" z3="1.22194588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45246117" y3="1.45341491" z3="-0.40304024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98103154" y3="-0.70377413" z3="1.39682971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35762493" y3="1.74177892" z3="2.66851809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88202908" y3="-0.96608364" z3="2.0848465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65403444" y3="-0.35251275" z3="3.34367796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.2127949" y3="0.76486171" z3="-1.23140185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32024986" y3="2.244834" z3="-0.39772872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43332974" y3="1.93539632" z3="-0.56241188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01171798" y3="-1.06916412" z3="2.43669696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95313372" y3="-0.23991655" z3="1.15744558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85599405" y3="-1.54513705" z3="0.69611143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41237404" y3="1.20088302" z3="3.62989086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57846687" y3="2.32944112" z3="2.66632539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.19994813" y3="2.45472136" z3="2.62106407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.79194036" y3="-0.80868956" z3="3.85614316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.5690128" y3="-0.52708619" z3="3.92521404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48370156" y3="0.72991506" z3="3.22382979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83923203" y3="-0.7034082" z3="0.99073318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41543723" y3="-2.0312022" z3="0.8531062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76277378" y3="-2.6769735" z3="1.89586772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55081515" y3="-1.98196339" z3="3.08282546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.0269832" y3="-0.68877394" z3="3.27710719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.67944203" y3="-0.05649664" z3="2.22342027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52233519" y3="-2.53020018" z3="-0.11168024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36808173" y3="-3.68637714" z3="1.77303389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68869619" y3="-2.58145419" z3="4.10638531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84255957" y3="-0.17774212" z3="4.22275691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02075018" y3="0.97602427" z3="2.33812355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79389825" y3="0.46580328" z3="-4.28643771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77442496" y3="-0.5014737" z3="-4.46307111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42822312" y3="-1.69326461" z3="-5.08896677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14267908" y3="-1.92463426" z3="-5.56868356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83085739" y3="-0.95426497" z3="-5.37011648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03728874" y3="1.38920205" z3="-3.7546384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79245716" y3="-0.35505896" z3="-4.10112613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44100607" y3="-2.74180726" z3="-5.22808781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08638265" y3="-2.86498145" z3="-6.07031094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.8520307" y3="-1.14045481" z3="-5.70682304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35619773" y3="-1.88634024" z3="5.04665491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31489535" y3="-3.72376487" z3="3.93950541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21918291" y3="-3.64377887" z3="-6.00736514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44248633" y3="-2.65565588" z3="-4.54546053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07254346" y3="1.16258858" z3="-1.49089174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11291443" y3="1.55171108" z3="-2.47035466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44181623" y3="1.49028787" z3="-1.68808776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85330822" y3="2.15430861" z3="-2.81763946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16725" y3="1.19240684" z3="-0.92471332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91019825" y3="2.39566893" z3="-2.96123191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57466565" y3="2.21966015" z3="-3.63864665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.9067901" y3="2.51226155" z3="-3.80746526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85424571" y3="2.49189482" z3="-4.41348896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23936002" y3="3.01966936" z3="-4.71743874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40583407" y3="3.15248701" z3="-3.33608878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29112714" y3="3.56451633" z3="-4.12443458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.213937" y3="4.16376341" z3="-2.743565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96417067" y3="5.49653445" z3="-2.96929012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04205432" y3="3.87533766" z3="-2.09426396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60135082" y3="6.25240588" z3="-2.50137072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06725562" y3="4.95036442" z3="-4.35201658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88822257" y3="5.89948524" z3="-3.79537891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21631067" y3="5.24765164" z3="-4.97272707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70488068" y3="6.96261186" z3="-3.97446214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.47983633" y3="-2.20321689" z3="-0.29446445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44974082" y3="-2.99492494" z3="-1.06228322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00821809" y3="-2.58654204" z3="0.59323642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09505273" y3="-1.38337522" z3="-0.71147449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.1784083" y3="-1.42663695" z3="-1.14510408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31540964" y3="-0.38547913" z3="-1.49122351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10197884" y3="-1.55176566" z3="-0.94040443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41915093" y3="-2.07962382" z3="-1.99741663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3396,.0525,-.1923;7.3856,.1676,.4174;6.6469,.4421,-.3418;4.7296,1.2369,-2.2629;4.3884,.4366,-1.1849;2.7304,.8462,-3.6635;3.6356,1.7488,-3.1368;1.3842,2.591,-4.6192;1.5631,1.2501,-4.3768;.5055,2.9262,-5.1788;2.9258,-.484,-3.4417;3.098,.048,-1.0023;2.4008,-1.0961,-2.0013;.9292,-.9649,-1.8289;3.1026,-2.4206,-1.8458;-.143,-3.6173,.6752;-.0145,-5.2469,-4.744;-.243,-4.9921,-3.7056;-.8411,-4.3082,-1.0846;.7811,-4.5827,-2.8536;-1.5585,-5.0861,-3.247;-1.8583,-4.7389,-1.9321;.4941,-4.2556,-1.5267;1.8135,-4.4989,-3.2009;-2.3569,-5.4007,-3.9225;-2.8946,-4.7806,-1.5881;-1.0312,-3.8619,.2369;-2.1718,-3.6505,.8818;-3.0589,-4.1139,.4478;-2.167,-3.5163,2.3489;-2.2255,-3.3331,5.1469;-3.3631,-3.7227,3.052;-1,-3.2244,3.071;-1.0266,-3.1334,4.4596;-3.3914,-3.6333,4.4409;-4.2778,-3.9632,2.5034;-.0406,-3.0896,2.5667;-.0976,-2.926,4.9983;-4.3294,-3.8056,4.9758;-2.2459,-3.2699,6.2385;1.4137,-3.8898,-.6227;2.1732,-3.3868,-1.0755;.5224,.2449,-4.7133;-3.0819,-1.7248,.0249;-2.9072,-.9743,1.1869;-1.8465,-.3225,1.5205;-.3719,.5516,1.2219;-.4525,1.4534,-.403;.981,-.7038,1.3968;-.3576,1.7418,2.6685;-3.882,-.9661,2.0848;-3.654,-.3525,3.3437;-.2128,.7649,-1.2314;.3202,2.2448,-.3977;-1.4333,1.9354,-.5624;1.0117,-1.0692,2.4367;1.9531,-.2399,1.1574;.856,-1.5451,.6961;-.4124,1.2009,3.6299;.5785,2.3294,2.6663;-1.1999,2.4547,2.6211;-2.7919,-.8087,3.8561;-4.569,-.5271,3.9252;-3.4837,.7299,3.2238;4.8392,-.7034,.9907;4.4154,-2.0312,.8531;3.7628,-2.677,1.8959;3.5508,-1.982,3.0828;4.027,-.6888,3.2771;4.6794,-.0565,2.2234;4.5223,-2.5302,-.1117;3.3681,-3.6864,1.773;2.6887,-2.5815,4.1064;3.8426,-.1777,4.2228;5.0208,.976,2.3381;-.7939,.4658,-4.2864;-1.7744,-.5015,-4.4631;-1.4282,-1.6933,-5.089;-.1427,-1.9246,-5.5687;.8309,-.9543,-5.3701;-1.0373,1.3892,-3.7546;-2.7925,-.3551,-4.1011;-2.441,-2.7418,-5.2281;.0864,-2.865,-6.0703;1.852,-1.1405,-5.7068;2.3562,-1.8863,5.0467;2.3149,-3.7238,3.9395;-2.2192,-3.6438,-6.0074;-3.4425,-2.6557,-4.5455;7.0725,1.1626,-1.4909;6.1129,1.5517,-2.4704;8.4418,1.4903,-1.6881;8.8533,2.1543,-2.8176;9.1672,1.1924,-.9247;9.9102,2.3957,-2.9612;6.5747,2.2197,-3.6386;7.9068,2.5123,-3.8075;5.8542,2.4919,-4.4135;8.2394,3.0197,-4.7174;3.4058,3.1525,-3.3361;2.2911,3.5645,-4.1244;4.2139,4.1638,-2.7436;3.9642,5.4965,-2.9693;5.0421,3.8753,-2.0943;4.6014,6.2524,-2.5014;2.0673,4.9504,-4.352;2.8882,5.8995,-3.7954;1.2163,5.2477,-4.9727;2.7049,6.9626,-3.9745;-4.4798,-2.2032,-.2945;-4.4497,-2.9949,-1.0623;-5.0082,-2.5865,.5932;-5.0951,-1.3834,-.7115;-2.1784,-1.4266,-1.1451;-2.3154,-.3855,-1.4912;-1.102,-1.5518,-.9404;-2.4192,-2.0796,-1.9974;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650430013062</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000157405878 0.000028485775 0.007363924317 0.001978024515</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002858851313 0.001905900875</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030811000 -0.000036140 0.000065702 0.000133349 0.000207778 0.000263829 0.000363077 0.000533744 0.000592177 0.000823165 0.000860862 0.000903306 0.001023389 0.001200239 0.001443070 0.001468936 0.001585365 0.001628002 0.001710150 0.001926429 0.001987745 0.002180673 0.002283314 0.002530039 0.002678028 0.002946568 0.002995657 0.003071697 0.003687971 0.003997276 0.004436969 0.004666572 0.004789279 0.005110319 0.005834866 0.006048416 0.006264987 0.006658224 0.006785219 0.007418991 0.007921924 0.008251354 0.008399400 0.009381636 0.009428639 0.009924581 0.010107363 0.011266436 0.011833133 0.012075756 0.012888106 0.013073462 0.014184861 0.014846349 0.015061989 0.015686081 0.015886325 0.016259338 0.016808625 0.017224848 0.018087140 0.018516058 0.018927860 0.019711858 0.020102417 0.020509847 0.021110674 0.021384890 0.021507431 0.023035658 0.023414346 0.026695933 0.026906092 0.028205690 0.028400278 0.029674510 0.030594584 0.031658118 0.033254642 0.033758293 0.034157678 0.035397001 0.035949249 0.037238923 0.038290885 0.039621785 0.040215489 0.041145677 0.042607770 0.044710450 0.045828989 0.047268541 0.048113718 0.049333433 0.050581228 0.051086211 0.051317006 0.051856318 0.052518765 0.052841423 0.052972637 0.053283829 0.054924799 0.055019740 0.056307550 0.056506004 0.056625848 0.057080333 0.057253066 0.059265837 0.060660199 0.061095348 0.061952677 0.062422741 0.063452559 0.064548454 0.065337788 0.066205703 0.066649913 0.068644410 0.069348979 0.070292296 0.072954658 0.074442775 0.074804816 0.076537737 0.079363393 0.084585537 0.087008923 0.087316429 0.087794056 0.089929854 0.090755802 0.091749302 0.094362356 0.095915201 0.096294208 0.096937593 0.097882474 0.098864365 0.100263653 0.101064178 0.102506279 0.103316020 0.103812800 0.104494087 0.104711835 0.105526073 0.106372571 0.107130074 0.108249822 0.110217040 0.111234736 0.112624593 0.113581971 0.115168144 0.116299145 0.116891772 0.118803602 0.121405667 0.122581416 0.123932350 0.125588775 0.126370770 0.126501728 0.126830550 0.128002876 0.132214703 0.135191994 0.135965959 0.143257573 0.144141151 0.147262923 0.147531713 0.149805567 0.150663127 0.154621664 0.154787790 0.156766881 0.161340646 0.162071675 0.173939444 0.174513474 0.182346350 0.185903839 0.186616677 0.189735646 0.190480977 0.194535026 0.196027133 0.199163661 0.200465832 0.205312178 0.207231046 0.207618521 0.210308563 0.216879114 0.217553940 0.218027693 0.220899645 0.221575380 0.225461928 0.226820326 0.232440651 0.235285390 0.235803221 0.236136924 0.244825178 0.256145065 0.257405866 0.264047610 0.269956512 0.280792929 0.284009369 0.286425309 0.291984228 0.297100370 0.304643610 0.306050696 0.307402700 0.314755204 0.316856213 0.317502308 0.322274972 0.330179165 0.333324315 0.351848642 0.353064494 0.355654281 0.356137757 0.360112979 0.363215514 0.364631592 0.383807659 0.386090906 0.392350278 0.410719869 0.426172040 0.431333164 0.462546069 0.469595360 0.479254467 0.484646994 0.484730594 0.487476175 0.491526670 0.509976402 0.515384749 0.535158670 0.569596036 0.575442839 0.591046638 0.594372731 0.607564480 0.608517884 0.645118043 0.648098692 0.649923535 0.674639587 0.678390824 0.688363310 0.693536093 0.694330768 0.700435785 0.706075257 0.718619606 0.742351851 0.751472967 0.759491022 0.772231150 0.774870349 0.779842901 0.811227903 0.816822400 0.820633246 0.823330183 0.823833378 0.832553349 0.835168840 0.838389279 0.842831260 0.845980826 0.847949615 0.850412353 0.859943217 0.866046178 0.869362591 0.875097077 0.886690755 0.889412536 0.890032370 0.900914776 0.901193937 0.904580883 0.924299284 0.928354535 0.936949385 0.938325129 0.966552780 0.978311247 0.987842976 1.002159420 1.020547569 1.028875732 1.043021662 1.053008011 1.059257388 1.069579510 1.087061656 1.089219946 1.105747007 1.112188259 1.113207992 1.130136318 1.136606060 1.141481785 1.145790291 1.176924388 1.179250133 1.182034133 1.187789526 1.191709357 1.198908054 1.225492776 1.229105641 1.275046068 1.303145937 1.321497867 1.328548244 1.333535509 1.336739173 1.337548897 1.341789779 1.344837914 1.345599643 1.360006644 1.379795317 1.383563790 1.386359437 1.402664170 1.421433551 1.430214575 1.551526593 1.687470889 1.777146373</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">346</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.34039586" y3="0.05206211" z3="-0.19342786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38675712" y3="0.16543345" z3="0.41559924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64782683" y3="0.44038673" z3="-0.34336517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73053649" y3="1.2370693" z3="-2.26371802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38916501" y3="0.43689107" z3="-1.18567598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7307687" y3="0.84783903" z3="-3.66374422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63669634" y3="1.74978617" z3="-3.13726957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38514712" y3="2.59349589" z3="-4.61866059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56345005" y3="1.25247631" z3="-4.37668478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50634705" y3="2.92933314" z3="-5.17789889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92541056" y3="-0.48246034" z3="-3.44210725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09847974" y3="0.04905381" z3="-1.00278965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40045393" y3="-1.09442259" z3="-2.00176758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92901331" y3="-0.96261031" z3="-1.8288525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10165841" y3="-2.41936651" z3="-1.84673389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14270812" y3="-3.619007" z3="0.67633727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01557113" y3="-5.24523836" z3="-4.74403232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24367143" y3="-4.99158835" z3="-3.70526771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84065541" y3="-4.31056331" z3="-1.08334022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78052027" y3="-4.58139619" z3="-2.85370203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55868908" y3="-5.08783899" z3="-3.24583568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.8579825" y3="-4.74220355" z3="-1.93040627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49408199" y3="-4.25555863" z3="-1.52643311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.812585" y3="-4.49568585" z3="-3.20174904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35728458" y3="-5.40279131" z3="-3.92108485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89382689" y3="-4.78592158" z3="-1.5855859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03052896" y3="-3.86482821" z3="0.23831153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17120936" y3="-3.65286117" z3="0.88307346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05840651" y3="-4.11680487" z3="0.44955073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16637382" y3="-3.5171504" z3="2.35003515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22485009" y3="-3.33062269" z3="5.14776183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36211398" y3="-3.72401062" z3="3.05342003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99978177" y3="-3.22302622" z3="3.07160251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02630122" y3="-3.1303485" z3="4.46013056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39040696" y3="-3.63301941" z3="4.44223578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27689925" y3="-3.96568069" z3="2.50515766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.0405147" y3="-3.08768413" z3="2.56699689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09732579" y3="-2.92170497" z3="4.99857885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32820946" y3="-3.80550021" z3="4.97743838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24511064" y3="-3.26616894" z3="6.23925459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41370093" y3="-3.88869082" z3="-0.62292763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17270433" y3="-3.38529032" z3="-1.07613361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52236367" y3="0.24745239" z3="-4.71293938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08131566" y3="-1.72824432" z3="0.02418353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90831967" y3="-0.977183" z3="1.18598985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84806826" y3="-0.32509194" z3="1.52056326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37504039" y3="0.55162707" z3="1.22259277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45666718" y3="1.45302953" z3="-0.40257096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98030256" y3="-0.70123005" z3="1.39795076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.36380645" y3="1.74192908" z3="2.6690956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.884171" y3="-0.96892554" z3="2.08283102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65823123" y3="-0.35381601" z3="3.34126423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21446241" y3="0.76491942" z3="-1.23057815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.31383518" y3="2.246607" z3="-0.39678045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43871758" y3="1.9322355" z3="-0.56288237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01232472" y3="-1.06543089" z3="2.43819505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95164381" y3="-0.23633458" z3="1.15728233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85601412" y3="-1.5437581" z3="0.69842171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.418554" y3="1.20099748" z3="3.63046203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57126586" y3="2.33118985" z3="2.66773003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20731206" y3="2.45342823" z3="2.62083509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7963411" y3="-0.80857013" z3="3.85525677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.57374632" y3="-0.52858535" z3="3.92191308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48873982" y3="0.7286383" z3="3.22041076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83977014" y3="-0.70380015" z3="0.98960275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4140765" y3="-2.03105234" z3="0.85156987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76137058" y3="-2.67644932" z3="1.8945535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55112487" y3="-1.98167564" z3="3.082094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02905294" y3="-0.6891389" z3="3.27664885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68170008" y3="-0.05725842" z3="2.22282858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52023748" y3="-2.52999459" z3="-0.11306733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3656018" y3="-3.68538082" z3="1.77167537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.68903416" y3="-2.58060669" z3="4.10599592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84547053" y3="-0.17810197" z3="4.22221215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02432835" y3="0.97478671" z3="2.33771508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79372319" y3="0.46845581" z3="-4.28553169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77422777" y3="-0.49900934" z3="-4.46110983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42817749" y3="-1.69104849" z3="-5.08679463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14293446" y3="-1.9223684" z3="-5.56723737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.830572" y3="-0.95178548" z3="-5.36959571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03696255" y3="1.39199709" z3="-3.75383775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79210114" y3="-0.35261416" z3="-4.09870912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44076799" y3="-2.73999867" z3="-5.22466092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08593361" y3="-2.86285972" z3="-6.06857615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85155521" y3="-1.13799032" z3="-5.70685336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35752885" y3="-1.88531405" z3="5.04648706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31420334" y3="-3.72262271" z3="3.93912334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.21940454" y3="-3.64207897" z3="-6.00387699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4416859" y3="-2.65397724" z3="-4.54118006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07365832" y3="1.16066935" z3="-1.49250865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11400916" y3="1.55089545" z3="-2.47150105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44316192" y3="1.48733109" z3="-1.69017801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.8547394" y3="2.15118524" z3="-2.81975951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16862472" y3="1.18851009" z3="-0.92720975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.91176897" y3="2.39160869" z3="-2.96374231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57592276" y3="2.21906083" z3="-3.63974381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90815938" y3="2.51036707" z3="-3.80906949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85544502" y3="2.492159" z3="-4.41422122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.24082303" y3="3.01797974" z3="-4.71898922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40755467" y3="3.15361237" z3="-3.33630758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29279366" y3="3.56633811" z3="-4.12422525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21635259" y3="4.16447278" z3="-2.74382301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96732209" y3="5.49734483" z3="-2.96937859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04455086" y3="3.87550942" z3="-2.09485956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60511857" y3="6.25280173" z3="-2.50163392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06959984" y3="4.95235406" z3="-4.3515043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.89128409" y3="5.90097744" z3="-3.79501344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21855882" y3="5.25023972" z3="-4.97180302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70848291" y3="6.96420597" z3="-3.97391075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4785843" y3="-2.20749861" z3="-0.29668489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.44716616" y3="-2.99912428" z3="-1.06452258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00762718" y3="-2.59122249" z3="0.59045804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09390866" y3="-1.38803652" z3="-0.71427192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17666763" y3="-1.42973729" z3="-1.14486479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31383872" y3="-0.38886593" z3="-1.49124217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10031216" y3="-1.55445338" z3="-0.93912883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.41627225" y3="-2.08279705" z3="-1.99739189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3404,.0521,-.1934;7.3868,.1654,.4156;6.6478,.4404,-.3434;4.7305,1.2371,-2.2637;4.3892,.4369,-1.1857;2.7308,.8478,-3.6637;3.6367,1.7498,-3.1373;1.3851,2.5935,-4.6187;1.5635,1.2525,-4.3767;.5063,2.9293,-5.1779;2.9254,-.4825,-3.4421;3.0985,.0491,-1.0028;2.4005,-1.0944,-2.0018;.929,-.9626,-1.8289;3.1017,-2.4194,-1.8467;-.1427,-3.619,.6763;-.0156,-5.2452,-4.744;-.2437,-4.9916,-3.7053;-.8407,-4.3106,-1.0833;.7805,-4.5814,-2.8537;-1.5587,-5.0878,-3.2458;-1.858,-4.7422,-1.9304;.4941,-4.2556,-1.5264;1.8126,-4.4957,-3.2017;-2.3573,-5.4028,-3.9211;-2.8938,-4.7859,-1.5856;-1.0305,-3.8648,.2383;-2.1712,-3.6529,.8831;-3.0584,-4.1168,.4496;-2.1664,-3.5172,2.35;-2.2249,-3.3306,5.1478;-3.3621,-3.724,3.0534;-.9998,-3.223,3.0716;-1.0263,-3.1303,4.4601;-3.3904,-3.633,4.4422;-4.2769,-3.9657,2.5052;-.0405,-3.0877,2.567;-.0973,-2.9217,4.9986;-4.3282,-3.8055,4.9774;-2.2451,-3.2662,6.2393;1.4137,-3.8887,-.6229;2.1727,-3.3853,-1.0761;.5224,.2475,-4.7129;-3.0813,-1.7282,.0242;-2.9083,-.9772,1.186;-1.8481,-.3251,1.5206;-.375,.5516,1.2226;-.4567,1.453,-.4026;.9803,-.7012,1.398;-.3638,1.7419,2.6691;-3.8842,-.9689,2.0828;-3.6582,-.3538,3.3413;-.2145,.7649,-1.2306;.3138,2.2466,-.3968;-1.4387,1.9322,-.5629;1.0123,-1.0654,2.4382;1.9516,-.2363,1.1573;.856,-1.5438,.6984;-.4186,1.201,3.6305;.5713,2.3312,2.6677;-1.2073,2.4534,2.6208;-2.7963,-.8086,3.8553;-4.5737,-.5286,3.9219;-3.4887,.7286,3.2204;4.8398,-.7038,.9896;4.4141,-2.0311,.8516;3.7614,-2.6764,1.8946;3.5511,-1.9817,3.0821;4.0291,-.6891,3.2766;4.6817,-.0573,2.2228;4.5202,-2.53,-.1131;3.3656,-3.6854,1.7717;2.689,-2.5806,4.106;3.8455,-.1781,4.2222;5.0243,.9748,2.3377;-.7937,.4685,-4.2855;-1.7742,-.499,-4.4611;-1.4282,-1.691,-5.0868;-.1429,-1.9224,-5.5672;.8306,-.9518,-5.3696;-1.037,1.392,-3.7538;-2.7921,-.3526,-4.0987;-2.4408,-2.74,-5.2247;.0859,-2.8629,-6.0686;1.8516,-1.138,-5.7069;2.3575,-1.8853,5.0465;2.3142,-3.7226,3.9391;-2.2194,-3.6421,-6.0039;-3.4417,-2.654,-4.5412;7.0737,1.1607,-1.4925;6.114,1.5509,-2.4715;8.4432,1.4873,-1.6902;8.8547,2.1512,-2.8198;9.1686,1.1885,-.9272;9.9118,2.3916,-2.9637;6.5759,2.2191,-3.6397;7.9082,2.5104,-3.8091;5.8554,2.4922,-4.4142;8.2408,3.018,-4.719;3.4076,3.1536,-3.3363;2.2928,3.5663,-4.1242;4.2164,4.1645,-2.7438;3.9673,5.4973,-2.9694;5.0446,3.8755,-2.0949;4.6051,6.2528,-2.5016;2.0696,4.9524,-4.3515;2.8913,5.901,-3.795;1.2186,5.2502,-4.9718;2.7085,6.9642,-3.9739;-4.4786,-2.2075,-.2967;-4.4472,-2.9991,-1.0645;-5.0076,-2.5912,.5905;-5.0939,-1.388,-.7143;-2.1767,-1.4297,-1.1449;-2.3138,-.3889,-1.4912;-1.1003,-1.5545,-.9391;-2.4163,-2.0828,-1.9974;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650429436240</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000276135165 0.000048767670 0.009826538984 0.002874139332</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001629636705 0.001086424470</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030811254 -0.000016234 0.000084844 0.000135852 0.000201757 0.000247468 0.000366758 0.000545570 0.000624316 0.000821731 0.000862509 0.000908594 0.001035022 0.001198961 0.001445330 0.001468917 0.001566441 0.001623835 0.001706204 0.001925655 0.001984177 0.002174061 0.002281673 0.002529308 0.002678007 0.002948691 0.002994593 0.003069293 0.003689427 0.003999145 0.004433444 0.004665206 0.004789542 0.005109966 0.005812277 0.006046840 0.006258945 0.006653554 0.006776023 0.007408166 0.007914935 0.008252290 0.008398461 0.009366570 0.009427693 0.009920009 0.010107408 0.011265574 0.011823518 0.012065995 0.012876628 0.013072423 0.014161580 0.014837242 0.015042928 0.015678825 0.015886367 0.016251273 0.016808847 0.017219182 0.018079928 0.018508334 0.018928485 0.019712033 0.020101148 0.020508537 0.021106367 0.021384036 0.021502892 0.023033000 0.023413502 0.026700035 0.026905537 0.028208820 0.028401238 0.029676303 0.030596279 0.031658383 0.033253617 0.033758138 0.034156512 0.035354500 0.035935794 0.037239177 0.038284422 0.039620585 0.040216485 0.041145523 0.042608063 0.044709873 0.045829395 0.047272517 0.048115109 0.049334626 0.050583441 0.051086259 0.051317089 0.051857490 0.052519323 0.052842163 0.052972698 0.053283921 0.054926567 0.055020733 0.056308607 0.056507287 0.056626618 0.057080434 0.057253558 0.059267515 0.060660068 0.061095490 0.061954465 0.062422780 0.063452345 0.064548693 0.065336543 0.066205483 0.066650069 0.068646997 0.069349026 0.070292221 0.072957770 0.074441229 0.074804852 0.076537260 0.079364003 0.084585948 0.087009543 0.087317219 0.087794719 0.089933308 0.090758352 0.091750500 0.094361411 0.095917076 0.096307039 0.096981520 0.097882460 0.098865138 0.100264465 0.101076910 0.102508341 0.103319505 0.103824239 0.104493820 0.104714641 0.105528092 0.106371006 0.107129984 0.108248999 0.110221517 0.111235325 0.112627927 0.113583817 0.115168850 0.116299406 0.116892060 0.118804873 0.121405725 0.122581919 0.123934916 0.125590565 0.126372867 0.126503663 0.126830810 0.128005302 0.132215291 0.135193766 0.135966128 0.143261996 0.144141423 0.147268631 0.147526955 0.149803001 0.150637560 0.154614144 0.154789763 0.156766369 0.161341582 0.162074020 0.173941909 0.174514119 0.182348315 0.185913200 0.186617104 0.189736497 0.190481223 0.194535712 0.196032122 0.199169966 0.200466463 0.205316039 0.207232073 0.207619236 0.210308604 0.216878830 0.217554884 0.218028270 0.220899892 0.221598946 0.225462348 0.226820868 0.232440988 0.235286989 0.235805543 0.236137362 0.244826016 0.256145302 0.257406391 0.264047969 0.269956149 0.280793201 0.284009444 0.286425619 0.291984292 0.297101280 0.304644317 0.306050802 0.307403200 0.314756472 0.316856845 0.317503371 0.322274937 0.330177135 0.333330597 0.351848810 0.353064717 0.355657559 0.356140440 0.360112631 0.363217240 0.364631685 0.383797636 0.386091440 0.392352037 0.410721073 0.426173690 0.431334393 0.462546406 0.469591637 0.479255266 0.484647234 0.484732249 0.487475845 0.491527373 0.509977513 0.515375811 0.535148857 0.569595031 0.575443799 0.591034617 0.594373567 0.607564506 0.608518180 0.645119217 0.648102477 0.649924204 0.674640565 0.678386673 0.688366594 0.693535840 0.694335612 0.700436776 0.706112292 0.718623258 0.742352475 0.751473524 0.759491597 0.772231199 0.774870941 0.779844114 0.811233009 0.816826742 0.820646876 0.823332888 0.823835117 0.832555935 0.835172717 0.838393231 0.842832759 0.845981427 0.847952412 0.850416504 0.859945585 0.866047814 0.869370539 0.875107781 0.886691464 0.889415343 0.890038330 0.900914944 0.901193481 0.904592506 0.924299556 0.928355207 0.936951726 0.938326457 0.966557823 0.978332799 0.987859716 1.002166292 1.020551539 1.028876592 1.043032161 1.053008493 1.059260918 1.069586538 1.087061938 1.089220733 1.105752865 1.112190769 1.113211787 1.130157199 1.136607228 1.141487672 1.145791923 1.176924494 1.179250831 1.182039823 1.187793904 1.191710337 1.198912192 1.225508127 1.229106531 1.275034919 1.303145143 1.321498568 1.328549925 1.333532918 1.336739383 1.337532417 1.341780440 1.344839044 1.345602089 1.360007524 1.379796803 1.383564978 1.386364881 1.402549579 1.421434975 1.430196390 1.551526808 1.687481504 1.777151714</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">347</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33975302" y3="0.05179142" z3="-0.19156202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38577835" y3="0.16786878" z3="0.41811353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64678928" y3="0.44178339" z3="-0.34114728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72911584" y3="1.23576897" z3="-2.26221016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38835827" y3="0.43532619" z3="-1.18416723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72958911" y3="0.84498575" z3="-3.66229317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63489304" y3="1.74757199" z3="-3.13578956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38298398" y3="2.58980743" z3="-4.61733514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.56202417" y3="1.24890565" z3="-4.37522332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50408099" y3="2.92506294" z3="-5.17675431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.92523532" y3="-0.48521217" z3="-3.44087586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.09802659" y3="0.04624019" z3="-1.00151086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40113075" y3="-1.09792208" z3="-2.00052896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92954415" y3="-0.96761823" z3="-1.82748196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10364781" y3="-2.42215834" z3="-1.84557524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14253657" y3="-3.61548775" z3="0.67293248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01281766" y3="-5.24968759" z3="-4.74472178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.2417039" y3="-4.99363709" z3="-3.70670645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84050527" y3="-4.30701672" z3="-1.08659929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.7824456" y3="-4.585287" z3="-2.85422491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55766182" y3="-5.08510805" z3="-3.24905855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85791782" y3="-4.73644066" z3="-1.93463477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49506605" y3="-4.2567768" z3="-1.52782851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81531404" y3="-4.50345798" z3="-3.20081524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35623126" y3="-5.39879367" z3="-3.92490808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89449194" y3="-4.77609505" z3="-1.59145819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03060421" y3="-3.86018462" z3="0.23463809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17109554" y3="-3.64939327" z3="0.87992163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05824596" y3="-4.11277744" z3="0.44578151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16611822" y3="-3.51572035" z3="2.34705364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22421855" y3="-3.33439192" z3="5.14513538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36190937" y3="-3.72320588" z3="3.05018112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99927216" y3="-3.22353052" z3="3.0690433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02563538" y3="-3.1334104" z3="4.457749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39003371" y3="-3.63477653" z3="4.43916351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27681965" y3="-3.96352913" z3="2.50158603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.03997111" y3="-3.08778122" z3="2.56459409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09657527" y3="-2.92616521" z3="4.99654311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32785683" y3="-3.80784237" z3="4.97412381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24430867" y3="-3.27206098" z3="6.23675374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41469788" y3="-3.89206013" z3="-0.6233969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17439677" y3="-3.38904227" z3="-1.07576999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.521282" y3="0.24367483" z3="-4.71180861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08231046" y3="-1.72322923" z3="0.02428371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9063957" y3="-0.9732748" z3="1.18632203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84509271" y3="-0.32197197" z3="1.51908496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.37154996" y3="0.55360897" z3="1.22076276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45112628" y3="1.45325066" z3="-0.40546621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98221023" y3="-0.70053685" z3="1.39860627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35992161" y3="1.74599252" z3="2.66557842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88029366" y3="-0.96523395" z3="2.085325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.6507723" y3="-0.35253924" z3="3.34429146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21167831" y3="0.76352959" z3="-1.23288541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32214751" y3="2.24413654" z3="-0.40096315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43159362" y3="1.93567727" z3="-0.56574958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.01213096" y3="-1.06480896" z3="2.43891974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95436675" y3="-0.23669981" z3="1.15941502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85790482" y3="-1.54276871" z3="0.69873591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41534933" y3="1.2066213" z3="3.62777058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57559601" y3="2.33454783" z3="2.66357036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.2028414" y3="2.45809166" z3="2.61596343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.78837368" y3="-0.80937744" z3="3.85560624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56522753" y3="-0.52710373" z3="3.9266538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48008851" y3="0.72989604" z3="3.22495609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83967455" y3="-0.70415303" z3="0.99161807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.4147464" y3="-2.03165763" z3="0.85383564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76228017" y3="-2.67716977" z3="1.89688522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55150399" y3="-1.98225422" z3="3.08422869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02880661" y3="-0.68947593" z3="3.27859697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68122251" y3="-0.05747116" z3="2.22470674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52120267" y3="-2.53072063" z3="-0.11074831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36707785" y3="-3.68634987" z3="1.77421523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6894832" y3="-2.58140124" z3="4.10806835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84488572" y3="-0.17836093" z3="4.22407581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02327863" y3="0.97478487" z3="2.33941831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.7952709" y3="0.46535422" z3="-4.28609753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77607331" y3="-0.50155991" z3="-4.46310581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42982904" y3="-1.69373723" z3="-5.08831189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14397244" y3="-1.92589376" z3="-5.56674478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.82982163" y3="-0.95589327" z3="-5.36774649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.03876627" y3="1.38911949" z3="-3.7549456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.79438014" y3="-0.35453476" z3="-4.1021579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.44288498" y3="-2.74190843" z3="-5.22797923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08506142" y3="-2.86658592" z3="-6.06769847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85119989" y3="-1.14272209" z3="-5.7034664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35754696" y3="-1.88617582" z3="5.04841013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31514417" y3="-3.72356283" z3="3.94125139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.2213182" y3="-3.64339348" z3="-6.00783463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.4442971" y3="-2.65598744" z3="-4.54522798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07212498" y3="1.16228582" z3="-1.49033808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11229501" y3="1.55107372" z3="-2.46972375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44128271" y3="1.49059149" z3="-1.68764109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85240298" y3="2.1546908" z3="-2.81724833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16687788" y3="1.19291858" z3="-0.92434724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.90918233" y3="2.3964414" z3="-2.96093167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57373219" y3="2.21940739" z3="-3.63801036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90568727" y3="2.51237075" z3="-3.80697625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85313816" y3="2.49141702" z3="-4.4127648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23800572" y3="3.02009592" z3="-4.71693992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.40481445" y3="3.15126312" z3="-3.33477575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.2899176" y3="3.56326205" z3="-4.12285554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21282849" y3="4.16267837" z3="-2.74219127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96297085" y3="5.49538962" z3="-2.96787629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04108363" y3="3.87431722" z3="-2.09304399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60020692" y3="6.25126295" z3="-2.50007826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06586755" y3="4.94911007" z3="-4.35030238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88686606" y3="5.89828264" z3="-3.79377932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21475253" y3="5.24636739" z3="-4.97079562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70343532" y3="6.96138788" z3="-3.97281271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.48048815" y3="-2.20150637" z3="-0.29397915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45117334" y3="-2.99296074" z3="-1.06210166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00801589" y3="-2.58512818" z3="0.59410827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.0961264" y3="-1.38152975" z3="-0.71010464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17960179" y3="-1.42498551" z3="-1.14630368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31697321" y3="-0.38397127" z3="-1.49236847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10294641" y3="-1.55023933" z3="-0.94233366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.4209915" y3="-2.07793951" z3="-1.99847824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3398,.0518,-.1916;7.3858,.1679,.4181;6.6468,.4418,-.3411;4.7291,1.2358,-2.2622;4.3884,.4353,-1.1842;2.7296,.845,-3.6623;3.6349,1.7476,-3.1358;1.383,2.5898,-4.6173;1.562,1.2489,-4.3752;.5041,2.9251,-5.1768;2.9252,-.4852,-3.4409;3.098,.0462,-1.0015;2.4011,-1.0979,-2.0005;.9295,-.9676,-1.8275;3.1036,-2.4222,-1.8456;-.1425,-3.6155,.6729;-.0128,-5.2497,-4.7447;-.2417,-4.9936,-3.7067;-.8405,-4.307,-1.0866;.7824,-4.5853,-2.8542;-1.5577,-5.0851,-3.2491;-1.8579,-4.7364,-1.9346;.4951,-4.2568,-1.5278;1.8153,-4.5035,-3.2008;-2.3562,-5.3988,-3.9249;-2.8945,-4.7761,-1.5915;-1.0306,-3.8602,.2346;-2.1711,-3.6494,.8799;-3.0582,-4.1128,.4458;-2.1661,-3.5157,2.3471;-2.2242,-3.3344,5.1451;-3.3619,-3.7232,3.0502;-.9993,-3.2235,3.069;-1.0256,-3.1334,4.4577;-3.39,-3.6348,4.4392;-4.2768,-3.9635,2.5016;-.04,-3.0878,2.5646;-.0966,-2.9262,4.9965;-4.3279,-3.8078,4.9741;-2.2443,-3.2721,6.2368;1.4147,-3.8921,-.6234;2.1744,-3.389,-1.0758;.5213,.2437,-4.7118;-3.0823,-1.7232,.0243;-2.9064,-.9733,1.1863;-1.8451,-.322,1.5191;-.3715,.5536,1.2208;-.4511,1.4533,-.4055;.9822,-.7005,1.3986;-.3599,1.746,2.6656;-3.8803,-.9652,2.0853;-3.6508,-.3525,3.3443;-.2117,.7635,-1.2329;.3221,2.2441,-.401;-1.4316,1.9357,-.5657;1.0121,-1.0648,2.4389;1.9544,-.2367,1.1594;.8579,-1.5428,.6987;-.4153,1.2066,3.6278;.5756,2.3345,2.6636;-1.2028,2.4581,2.616;-2.7884,-.8094,3.8556;-4.5652,-.5271,3.9267;-3.4801,.7299,3.225;4.8397,-.7042,.9916;4.4147,-2.0317,.8538;3.7623,-2.6772,1.8969;3.5515,-1.9823,3.0842;4.0288,-.6895,3.2786;4.6812,-.0575,2.2247;4.5212,-2.5307,-.1107;3.3671,-3.6863,1.7742;2.6895,-2.5814,4.1081;3.8449,-.1784,4.2241;5.0233,.9748,2.3394;-.7953,.4654,-4.2861;-1.7761,-.5016,-4.4631;-1.4298,-1.6937,-5.0883;-.144,-1.9259,-5.5667;.8298,-.9559,-5.3677;-1.0388,1.3891,-3.7549;-2.7944,-.3545,-4.1022;-2.4429,-2.7419,-5.228;.0851,-2.8666,-6.0677;1.8512,-1.1427,-5.7035;2.3575,-1.8862,5.0484;2.3151,-3.7236,3.9413;-2.2213,-3.6434,-6.0078;-3.4443,-2.656,-4.5452;7.0721,1.1623,-1.4903;6.1123,1.5511,-2.4697;8.4413,1.4906,-1.6876;8.8524,2.1547,-2.8172;9.1669,1.1929,-.9243;9.9092,2.3964,-2.9609;6.5737,2.2194,-3.638;7.9057,2.5124,-3.807;5.8531,2.4914,-4.4128;8.238,3.0201,-4.7169;3.4048,3.1513,-3.3348;2.2899,3.5633,-4.1229;4.2128,4.1627,-2.7422;3.963,5.4954,-2.9679;5.0411,3.8743,-2.093;4.6002,6.2513,-2.5001;2.0659,4.9491,-4.3503;2.8869,5.8983,-3.7938;1.2148,5.2464,-4.9708;2.7034,6.9614,-3.9728;-4.4805,-2.2015,-.294;-4.4512,-2.993,-1.0621;-5.008,-2.5851,.5941;-5.0961,-1.3815,-.7101;-2.1796,-1.425,-1.1463;-2.317,-.384,-1.4924;-1.1029,-1.5502,-.9423;-2.421,-2.0779,-1.9985;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650429930733</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000192862193 0.000034281982 0.002980604053 0.000994596756</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002333272237 0.001555514825</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.030810874 0.000039075 0.000068822 0.000193147 0.000219865 0.000229515 0.000361740 0.000538281 0.000610152 0.000819917 0.000861422 0.000911347 0.001029210 0.001198046 0.001446637 0.001466868 0.001565105 0.001623118 0.001705291 0.001927248 0.001983969 0.002174652 0.002284127 0.002529223 0.002678551 0.002951224 0.002993684 0.003067088 0.003689545 0.003995677 0.004432872 0.004664515 0.004792055 0.005109559 0.005798909 0.006046729 0.006257756 0.006650108 0.006772724 0.007403041 0.007910553 0.008253201 0.008398201 0.009359478 0.009426958 0.009917486 0.010108276 0.011265373 0.011816444 0.012059694 0.012870373 0.013070887 0.014148338 0.014829732 0.015039271 0.015675193 0.015888619 0.016248484 0.016810212 0.017214392 0.018075054 0.018503608 0.018931143 0.019712942 0.020099598 0.020508182 0.021103820 0.021383568 0.021502046 0.023033618 0.023413075 0.026703248 0.026905407 0.028215713 0.028401122 0.029678587 0.030599182 0.031658678 0.033253272 0.033758109 0.034156336 0.035324063 0.035927329 0.037239024 0.038280039 0.039621855 0.040217438 0.041145535 0.042608632 0.044710035 0.045830069 0.047273588 0.048115749 0.049337171 0.050584205 0.051086338 0.051317179 0.051857776 0.052519816 0.052843090 0.052972759 0.053284225 0.054927545 0.055021223 0.056311096 0.056511594 0.056627676 0.057080462 0.057254112 0.059269161 0.060660245 0.061096250 0.061957155 0.062422855 0.063452343 0.064549018 0.065336647 0.066206337 0.066649948 0.068651040 0.069349164 0.070292193 0.072961514 0.074439696 0.074804862 0.076537245 0.079364484 0.084585870 0.087009407 0.087317039 0.087795557 0.089937203 0.090760379 0.091751461 0.094361543 0.095919331 0.096325454 0.097067521 0.097882639 0.098869104 0.100265509 0.101112536 0.102510149 0.103326120 0.103848264 0.104494692 0.104724655 0.105531607 0.106370849 0.107130126 0.108248559 0.110228866 0.111237033 0.112632812 0.113585825 0.115169735 0.116299579 0.116892097 0.118806667 0.121405740 0.122583725 0.123941763 0.125593253 0.126374737 0.126510953 0.126831015 0.128007258 0.132215517 0.135195685 0.135966177 0.143265295 0.144142010 0.147269971 0.147527158 0.149802036 0.150617235 0.154610894 0.154790099 0.156765803 0.161342535 0.162074767 0.173946627 0.174516562 0.182349759 0.185935918 0.186618526 0.189737450 0.190481346 0.194535423 0.196038971 0.199177158 0.200466794 0.205317059 0.207233846 0.207620171 0.210308792 0.216879060 0.217556368 0.218029108 0.220900454 0.221611497 0.225463314 0.226822019 0.232441709 0.235287726 0.235808817 0.236138190 0.244826846 0.256145148 0.257406815 0.264048414 0.269955824 0.280794005 0.284009920 0.286426069 0.291984215 0.297103573 0.304646295 0.306051010 0.307403261 0.314757789 0.316857127 0.317504210 0.322275212 0.330176413 0.333333535 0.351848998 0.353064897 0.355661108 0.356142664 0.360112578 0.363217808 0.364632040 0.383792688 0.386093956 0.392356119 0.410721879 0.426175445 0.431334664 0.462548019 0.469593596 0.479256140 0.484648129 0.484734822 0.487476811 0.491529061 0.509979608 0.515372681 0.535145053 0.569594308 0.575445783 0.591032193 0.594377376 0.607565767 0.608518414 0.645119270 0.648111595 0.649925100 0.674642005 0.678385590 0.688374331 0.693535852 0.694349681 0.700437088 0.706200775 0.718638523 0.742354573 0.751475136 0.759491847 0.772231194 0.774872234 0.779844324 0.811233907 0.816828771 0.820650742 0.823333513 0.823836320 0.832558433 0.835186433 0.838402676 0.842833380 0.845983095 0.847956693 0.850426299 0.859953130 0.866048701 0.869397830 0.875130129 0.886692200 0.889417441 0.890039434 0.900915107 0.901193523 0.904615025 0.924300403 0.928356390 0.936953011 0.938331914 0.966572808 0.978399484 0.987919347 1.002183551 1.020566259 1.028880730 1.043061084 1.053008647 1.059268056 1.069599600 1.087062029 1.089221978 1.105755903 1.112201369 1.113218963 1.130165181 1.136611008 1.141497773 1.145793142 1.176925032 1.179250883 1.182051137 1.187802702 1.191710634 1.198915668 1.225529199 1.229107094 1.275078261 1.303145215 1.321498820 1.328554668 1.333538436 1.336739837 1.337524893 1.341777252 1.344842781 1.345608012 1.360009180 1.379796673 1.383566079 1.386372912 1.402495397 1.421437247 1.430192314 1.551526948 1.687497883 1.777154049</array>
            </module>
            <module dictRef="cc:irc" id="irc">
               <module id="irc-center">
                  <molecule cmlx:templateRef="atom" id="irc-center.0">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.33936122" y3="0.05210134" z3="-0.19201567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="7.38530745" y3="0.16754932" z3="0.41796705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.64653325" y3="0.44189871" z3="-0.34131147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72935583" y3="1.23657266" z3="-2.26260648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38821659" y3="0.43608268" z3="-1.18467189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.73016597" y3="0.84593451" z3="-3.66321875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.63541618" y3="1.74849122" z3="-3.13648995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="1.38411338" y3="2.59076799" z3="-4.61898814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.5628721" y3="1.24988615" z3="-4.37659803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="0.50540095" y3="2.92605673" z3="-5.17869206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.9255244" y3="-0.4842712" z3="-3.44157998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.0977608" y3="0.04732628" z3="-1.00221143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="2.40074172" y3="-1.09667082" z3="-2.0013512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.92915666" y3="-0.96587593" z3="-1.82874093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="3.10280291" y3="-2.42112024" z3="-1.84609895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.14270182" y3="-3.61647334" z3="0.67458172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-0.01401538" y3="-5.24800316" z3="-4.74401663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-0.24260361" y3="-4.99271175" z3="-3.70575202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-0.84080375" y3="-4.30774056" z3="-1.08507047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="0.78155449" y3="-4.58365216" z3="-2.85363556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-1.55822493" y3="-5.08579129" z3="-3.24745241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-1.85816246" y3="-4.73802612" z3="-1.9327154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="0.49450175" y3="-4.25595713" z3="-1.52696617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81412724" y3="-4.50047737" z3="-3.20073733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-2.35672361" y3="-5.40008264" z3="-3.92303453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-2.89449963" y3="-4.77903703" z3="-1.58895584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-1.03082012" y3="-3.86121164" z3="0.2362881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-2.17136604" y3="-3.65010467" z3="0.8814148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-3.05845144" y3="-4.11362585" z3="0.44738836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.16645718" y3="-3.51613033" z3="2.34853982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-2.22467206" y3="-3.33395224" z3="5.1465809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.36233989" y3="-3.72319725" z3="3.05165537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.99954734" y3="-3.22403112" z3="3.07054191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-1.02596091" y3="-3.13349287" z3="4.45921929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.39053805" y3="-3.6343233" z3="4.44061012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-4.27712547" y3="-3.96372538" z3="2.50311038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-0.04018097" y3="-3.08867161" z3="2.56613765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-0.09697148" y3="-2.92612394" z3="4.99795419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.32841645" y3="-3.80708099" z3="4.97556568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-2.24486324" y3="-3.2712127" z3="6.23817016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41413931" y3="-3.8904338" z3="-0.62289893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="2.17365316" y3="-3.3874246" z3="-1.07566165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.52209458" y3="0.24466742" z3="-4.71304202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08217857" y3="-1.7243933" z3="0.02499071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90688563" y3="-0.97398886" z3="1.18688263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-1.84598039" y3="-0.32217646" z3="1.5198807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-0.3721003" y3="0.55282144" z3="1.22108799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-0.45248276" y3="1.45324912" z3="-0.40467677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.98143453" y3="-0.7017263" z3="1.39763566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-0.35923703" y3="1.74450565" z3="2.66644578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.88113431" y3="-0.96598161" z3="2.08548152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-3.65233139" y3="-0.35279977" z3="3.34434401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-0.21276844" y3="0.76407547" z3="-1.23249719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="0.32025201" y3="2.24465185" z3="-0.39990809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.43331485" y3="1.93513644" z3="-0.56449882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.0117666" y3="-1.06644444" z3="2.4377772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="1.95350952" y3="-0.23779872" z3="1.15832694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.85688366" y3="-1.54363347" z3="0.69745767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-0.41419065" y3="1.20467753" z3="3.62841645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.57643666" y3="2.3328218" z3="2.66409836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-1.20201117" y3="2.45684042" z3="2.61770263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.7899269" y3="-0.80914938" z3="3.85612204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-4.56693185" y3="-0.52754735" z3="3.92641128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-3.48204217" y3="0.72966361" z3="3.22472567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.83906355" y3="-0.70406819" z3="0.99091235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.41460168" y3="-2.03163702" z3="0.85284884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.76204455" y3="-2.67756927" z3="1.89557946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.55086259" y3="-1.98297957" z3="3.08296403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="4.02773204" y3="-0.69010022" z3="3.27765979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="4.68009159" y3="-0.05765099" z3="2.22400227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52111583" y3="-2.53034435" z3="-0.11205702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36694347" y3="-3.68677417" z3="1.77248351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.6889607" y3="-2.58259688" z3="4.10662985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="3.84378486" y3="-0.17936098" z3="4.22348902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="5.02188884" y3="0.97466542" z3="2.33902808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.79426414" y3="0.46596225" z3="-4.28662627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.77491002" y3="-0.5011998" z3="-4.46316783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-1.42872113" y3="-1.69323407" z3="-5.08866919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.14309954" y3="-1.92496894" z3="-5.56794132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="0.83055168" y3="-0.95470642" z3="-5.36939356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-1.0376784" y3="1.38957853" z3="-3.75517454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.7930357" y3="-0.35449283" z3="-4.10162329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-2.4416316" y3="-2.74166016" z3="-5.22782356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="0.08590768" y3="-2.86550767" z3="-6.06916904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.85177313" y3="-1.1411941" z3="-5.70576291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.35703153" y3="-1.88773354" z3="5.04729315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.31476793" y3="-3.72474316" z3="3.93945789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-2.219957" y3="-3.64354447" z3="-6.00721562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-3.44306931" y3="-2.65548616" z3="-4.54513087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="7.07221794" y3="1.1625302" z3="-1.49030099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.11264874" y3="1.55159646" z3="-2.4698399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="8.44146416" y3="1.49054795" z3="-1.68726484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.85296381" y3="2.15476087" z3="-2.816677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="9.16683759" y3="1.1926779" z3="-0.92383393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.9098219" y3="2.39637053" z3="-2.96008232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57445286" y3="2.21982283" z3="-3.63798536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.90651503" y3="2.5126592" z3="-3.80658697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85409185" y3="2.49199138" z3="-4.41290461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.23910545" y3="3.02026399" z3="-4.71643494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="3.4056348" y3="3.15216087" z3="-3.33581861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="2.29105517" y3="3.56420899" z3="-4.12433351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="4.21367207" y3="4.16348421" z3="-2.74321315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="3.96410111" y3="5.49622953" z3="-2.96919126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="5.04164218" y3="3.87509001" z3="-2.09371797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="4.60129973" y3="6.25209054" z3="-2.50129309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="2.06734173" y3="4.9500599" z3="-4.35211839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="2.88834523" y3="5.89917092" z3="-3.79552816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="1.21650857" y3="5.24735117" z3="-4.97297938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="2.70516798" y3="6.96228586" z3="-3.97482366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.4801925" y3="-2.20294022" z3="-0.29367878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-4.45041598" y3="-2.99472778" z3="-1.0614283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.00810626" y3="-2.58623535" z3="0.5943186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-5.09567787" y3="-1.38319299" z3="-0.71046219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.17922384" y3="-1.42617658" z3="-1.14545275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31655446" y3="-0.3851156" z3="-1.49162659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.10266334" y3="-1.55120404" z3="-0.94118045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-2.42026583" y3="-2.07925309" z3="-1.99761196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3394,.0521,-.192;7.3853,.1675,.418;6.6465,.4419,-.3413;4.7294,1.2366,-2.2626;4.3882,.4361,-1.1847;2.7302,.8459,-3.6632;3.6354,1.7485,-3.1365;1.3841,2.5908,-4.619;1.5629,1.2499,-4.3766;.5054,2.9261,-5.1787;2.9255,-.4843,-3.4416;3.0978,.0473,-1.0022;2.4007,-1.0967,-2.0014;.9292,-.9659,-1.8287;3.1028,-2.4211,-1.8461;-.1427,-3.6165,.6746;-.014,-5.248,-4.744;-.2426,-4.9927,-3.7058;-.8408,-4.3077,-1.0851;.7816,-4.5837,-2.8536;-1.5582,-5.0858,-3.2475;-1.8582,-4.738,-1.9327;.4945,-4.256,-1.527;1.8141,-4.5005,-3.2007;-2.3567,-5.4001,-3.923;-2.8945,-4.779,-1.589;-1.0308,-3.8612,.2363;-2.1714,-3.6501,.8814;-3.0585,-4.1136,.4474;-2.1665,-3.5161,2.3485;-2.2247,-3.334,5.1466;-3.3623,-3.7232,3.0517;-.9995,-3.224,3.0705;-1.026,-3.1335,4.4592;-3.3905,-3.6343,4.4406;-4.2771,-3.9637,2.5031;-.0402,-3.0887,2.5661;-.097,-2.9261,4.998;-4.3284,-3.8071,4.9756;-2.2449,-3.2712,6.2382;1.4141,-3.8904,-.6229;2.1737,-3.3874,-1.0757;.5221,.2447,-4.713;-3.0822,-1.7244,.025;-2.9069,-.974,1.1869;-1.846,-.3222,1.5199;-.3721,.5528,1.2211;-.4525,1.4532,-.4047;.9814,-.7017,1.3976;-.3592,1.7445,2.6664;-3.8811,-.966,2.0855;-3.6523,-.3528,3.3443;-.2128,.7641,-1.2325;.3203,2.2447,-.3999;-1.4333,1.9351,-.5645;1.0118,-1.0664,2.4378;1.9535,-.2378,1.1583;.8569,-1.5436,.6975;-.4142,1.2047,3.6284;.5764,2.3328,2.6641;-1.202,2.4568,2.6177;-2.7899,-.8091,3.8561;-4.5669,-.5275,3.9264;-3.482,.7297,3.2247;4.8391,-.7041,.9909;4.4146,-2.0316,.8528;3.762,-2.6776,1.8956;3.5509,-1.983,3.083;4.0277,-.6901,3.2777;4.6801,-.0577,2.224;4.5211,-2.5303,-.1121;3.3669,-3.6868,1.7725;2.689,-2.5826,4.1066;3.8438,-.1794,4.2235;5.0219,.9747,2.339;-.7943,.466,-4.2866;-1.7749,-.5012,-4.4632;-1.4287,-1.6932,-5.0887;-.1431,-1.925,-5.5679;.8306,-.9547,-5.3694;-1.0377,1.3896,-3.7552;-2.793,-.3545,-4.1016;-2.4416,-2.7417,-5.2278;.0859,-2.8655,-6.0692;1.8518,-1.1412,-5.7058;2.357,-1.8877,5.0473;2.3148,-3.7247,3.9395;-2.22,-3.6435,-6.0072;-3.4431,-2.6555,-4.5451;7.0722,1.1625,-1.4903;6.1126,1.5516,-2.4698;8.4415,1.4905,-1.6873;8.853,2.1548,-2.8167;9.1668,1.1927,-.9238;9.9098,2.3964,-2.9601;6.5745,2.2198,-3.638;7.9065,2.5127,-3.8066;5.8541,2.492,-4.4129;8.2391,3.0203,-4.7164;3.4056,3.1522,-3.3358;2.2911,3.5642,-4.1243;4.2137,4.1635,-2.7432;3.9641,5.4962,-2.9692;5.0416,3.8751,-2.0937;4.6013,6.2521,-2.5013;2.0673,4.9501,-4.3521;2.8883,5.8992,-3.7955;1.2165,5.2474,-4.973;2.7052,6.9623,-3.9748;-4.4802,-2.2029,-.2937;-4.4504,-2.9947,-1.0614;-5.0081,-2.5862,.5943;-5.0957,-1.3832,-.7105;-2.1792,-1.4262,-1.1455;-2.3166,-.3851,-1.4916;-1.1027,-1.5512,-.9412;-2.4203,-2.0793,-1.9976;</scalar>
</formula>
</molecule>
                  <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" id="irc-center.0" units="nonsi:hartree">-3667.650430148929</scalar>
                  <scalar dictRef="cc:ircStep" id="step">0</scalar>
               </module>
               <module cmlx:templateRef="irc-path">
                  <scalar cmlx:templateRef="direction" dataType="xsd:string" dictRef="g:ircDirection">FORWARD</scalar>
               </module>
               <module cmlx:templateRef="irc-path">
                  <scalar cmlx:templateRef="direction" dataType="xsd:string" dictRef="g:ircDirection">BACKWARD</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module dictRef="cc:vibrations">
                     <array dataType="xsd:integer" dictRef="x:serial" size="345">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="345">-231.72729941 14.01144669 23.46353162 28.77576241 30.88453701 32.56890465 37.23415747 38.35585109 41.81386679 50.80878119 53.39000080 55.55746347 61.94875710 65.88351921 67.07446865 70.92479114 75.76212950 76.47967084 78.64690933 86.30283237 88.75570776 92.07097733 94.80267936 97.93130116 98.93633112 105.05289593 110.21462463 117.71632886 123.18399801 129.60354181 133.17564022 140.71172170 146.67760043 151.50995046 166.92151918 168.75142214 173.26513427 178.16704694 181.24416127 183.80705603 186.64774737 199.68353848 200.93757898 202.85624715 209.90700072 215.13646401 221.83064214 224.05651973 225.27497419 231.77838197 233.38128446 248.77451227 250.41827761 253.65503622 259.60308425 267.17085664 271.40420651 274.69284228 281.91624592 287.31202695 290.43387448 299.55734856 317.65973025 326.44790673 336.10099159 337.50923619 340.93267952 344.59512212 353.92902031 360.83799311 367.82775777 384.92424483 399.01074876 404.53715421 410.85036469 424.33665876 425.79454819 427.62092142 439.45440853 449.62950943 451.48161325 454.53408737 460.31451530 468.89284978 473.71794374 480.93985278 490.48690069 493.31196272 503.77838080 511.99138034 517.65181755 536.62608811 544.41325481 546.86171938 552.84791017 560.87509404 567.31807725 575.23819966 579.91293273 581.24346001 583.89576858 585.37216469 590.87577397 600.73276844 606.73415578 610.80712050 623.56451673 636.19207217 638.21326135 640.89409587 648.66433370 650.86068428 659.57119842 660.29323980 680.47358165 687.34672005 705.36602830 711.57298094 711.80875106 715.65979590 716.26843575 729.37455030 730.01204673 736.58867678 745.80846004 753.61014853 756.19547074 771.76346677 775.62380913 780.19881009 783.37187276 785.24530168 787.10170933 787.37694297 792.42869829 803.26601059 803.29379411 805.54812948 808.48137633 814.26627193 834.11419994 846.89727666 850.47531075 858.51053664 861.45088231 866.56047867 870.83233104 873.29001078 874.93001857 876.32410381 882.90997281 885.74085643 888.17586993 894.63811690 898.84689302 899.43110408 900.88606402 903.56587149 905.59823963 906.85174872 909.23060197 918.02356302 946.97450606 949.62927152 957.64849730 964.65928039 976.29458292 979.94600416 994.87093735 1002.43732283 1004.68015487 1006.31137351 1007.90923474 1008.64540312 1011.05690454 1014.01508012 1015.49558349 1017.22468245 1018.59277534 1023.87391581 1026.13384952 1032.05241240 1032.15657562 1034.93023129 1037.80309044 1041.68774899 1051.18273039 1053.54833355 1070.77158670 1071.49176360 1075.46861401 1076.86802181 1087.35181810 1113.34318835 1115.32661574 1124.26755883 1126.67892110 1132.74523646 1135.37494254 1136.37390267 1156.02222221 1162.22450320 1166.45398838 1175.54186367 1180.21028625 1181.78924103 1188.05352862 1188.34824725 1189.10565316 1211.41638970 1214.28579013 1214.60925573 1218.72276117 1226.03943757 1228.46622018 1231.34154179 1253.89524071 1256.24797132 1269.28993709 1287.38792312 1290.26476073 1292.01967935 1301.90644961 1305.35311648 1307.13254332 1309.13217078 1310.59826859 1314.24670588 1323.20367809 1324.28381619 1327.24196199 1333.84079260 1345.41848679 1349.27283553 1364.54054493 1372.61581842 1377.24745582 1380.24014222 1383.88982497 1385.73323200 1398.00940986 1415.72566548 1430.76483004 1431.83645708 1434.65112761 1437.80455980 1439.93859446 1440.91586297 1442.51176841 1444.16354586 1451.00585281 1454.87038088 1458.37023869 1461.25379799 1462.14055107 1464.52706152 1466.11095777 1473.66245175 1482.97265603 1483.46961230 1484.48030067 1489.45460430 1490.12533786 1493.84441096 1496.41831279 1500.02886524 1501.68937310 1505.86679987 1510.05264490 1514.37428092 1527.28594068 1535.10979759 1538.80131041 1555.99912710 1559.24721851 1562.56512561 1569.99308340 1577.91400495 1583.94871390 1613.87262395 1662.82893356 1663.84039994 1668.62970686 1670.03750262 1675.38866701 1680.69317557 1686.90051397 1691.74527756 1700.13972569 1701.14104488 1704.12893154 1704.79296109 1712.40916058 1723.70309681 1728.77289849 1740.52260596 1746.31349273 2827.33673452 3025.85042177 3026.32038206 3028.70817559 3038.50336830 3052.88482400 3058.53796144 3105.82877749 3120.75898889 3124.40247436 3126.96542862 3132.39169985 3146.43352928 3154.17343320 3155.93943595 3158.68780134 3162.30453169 3165.28886085 3188.80292794 3189.76610658 3192.76435229 3192.91990318 3194.59303217 3199.02431068 3201.02191866 3201.75032853 3204.69077192 3208.02036310 3208.56649825 3209.48744388 3210.73366492 3215.29076974 3216.05652449 3216.11015576 3222.68652102 3225.19265701 3226.64940235 3230.38631144 3231.75213718 3233.48444560 3234.49273494 3236.35644068 3238.60850542 3250.03652547 3251.35234597 3252.05920583 3257.13355019 3528.99062295</array>
                     <array dataType="xsd:double" dictRef="cc:redmass" size="345">8.24398160 6.54813474 6.86559405 6.68540727 7.43628115 5.24480032 5.66822807 5.98109908 6.55590213 6.97701461 9.16029515 6.19143225 6.29108186 5.75683511 5.49234124 5.68067934 5.43704596 5.59834172 5.37068550 4.42692800 4.94188941 5.58224570 4.32519004 4.40702836 4.23354771 5.75479876 6.17588740 3.11821727 4.90246937 5.60125013 5.70107449 6.03405462 5.80476217 7.21396616 5.23664153 1.19427064 2.91333053 2.04606368 3.41380396 6.78825955 2.49038863 5.76015896 3.04312570 1.84803810 1.92105836 3.34114271 2.13532899 3.56903290 5.90715858 2.39614596 2.42240510 2.43940227 6.00183818 3.36576273 3.27836500 3.26438081 5.53317858 1.45133720 2.36440094 6.04667299 5.21269349 3.39713410 5.45425246 5.10166606 4.07693549 5.06193988 3.29352966 5.38569373 1.44726032 5.32218461 6.04489277 5.77374111 2.09984501 3.26072264 4.36383810 2.85082231 2.98944437 3.06308974 5.78393539 7.96566475 4.95459939 8.23493331 7.86149776 3.94769515 4.20513892 4.93333068 6.58782168 5.06949221 5.52193664 5.60335652 4.66860662 4.98355338 3.05905344 4.22454995 5.32909948 4.94098867 5.20754957 5.06883369 4.52757473 4.31032665 4.30826298 4.67362408 5.35044599 6.68214542 6.27229006 3.85591776 5.47598795 6.36545376 6.65973768 6.80972066 7.04042915 3.50299134 5.28670697 5.34451385 5.72766009 5.93404615 2.07894228 2.21246704 4.31080865 1.97831681 2.30807763 2.95252435 3.74700713 3.34067716 1.65141522 1.79404716 5.92605680 2.59632902 3.84946431 1.36699337 1.67742932 1.47267027 1.82880647 2.83989139 3.67107022 2.03210366 3.42268054 2.06325082 4.81401651 4.25613530 5.05853648 3.88333112 4.00587996 1.30875236 1.29362304 4.55771463 4.08392880 2.96718013 1.97427893 1.37894330 1.77579692 2.02086861 2.98693907 2.15850633 1.78190979 1.77794242 2.52766762 1.61055006 2.42257734 2.96834102 6.49465811 5.32939626 1.67165737 1.65976668 1.39756124 1.36085537 6.72143855 1.33898398 1.64530701 1.45528661 1.63090931 1.88633607 1.43637693 1.43105942 1.35588987 1.51470602 1.45101343 1.35158712 1.43386571 4.27661377 1.42412406 1.39994530 1.32331591 2.75406296 1.44835010 2.48098336 1.34737141 2.82175562 2.01975655 2.12878081 1.88103036 2.06770960 2.75999618 1.56578842 3.39050922 10.95663189 1.52316617 1.23828429 1.26368514 1.72228007 2.37834749 2.06340005 1.49514661 1.25793867 1.09762319 1.26349291 1.10584042 1.54469774 1.26703626 1.45538314 1.39873417 1.52400218 1.98519826 1.14987876 1.64324454 1.69348764 2.42605238 1.72582491 2.02287129 3.44556583 4.05141834 2.63814708 2.02529944 1.59256850 1.76314107 2.09843302 1.32055649 2.87633696 1.45448951 2.26164873 1.48722427 2.56495420 2.35130144 2.43775274 2.30518318 3.02176688 1.40491229 5.61034464 4.09060343 4.61673408 4.57220977 1.41790688 1.27262049 3.32231563 1.40045216 5.10944902 4.83234483 1.26260275 1.56552166 1.07773195 1.18087773 1.07941576 2.51375414 2.21080310 1.40875743 1.78889201 3.02911767 1.08384063 1.10100875 7.91884883 1.04587834 6.12511574 1.17364977 3.93385537 1.07473224 1.07945808 3.54968250 3.31389202 2.34294632 4.00878646 1.09517287 2.78415444 2.24512775 2.28863193 2.99313170 3.09558418 4.07910237 4.35006048 2.58829204 4.00823544 8.56612132 8.05565688 5.62622820 8.12862489 8.46809972 5.86228364 6.71722469 6.94525579 5.74294318 5.97572234 6.55671055 6.79497719 6.28789118 6.94180568 7.32664837 12.31390679 12.55991696 1.07970147 1.04207467 1.03721558 1.03758629 1.04470994 1.03649057 1.03251874 1.09853710 1.10125752 1.09646373 1.10217218 1.10385457 1.10490943 1.10489791 1.10143708 1.10963107 1.10418747 1.10365999 1.08788684 1.08757578 1.09201046 1.09256894 1.10865001 1.08665505 1.09045460 1.09146598 1.08699117 1.09198544 1.09069298 1.09135798 1.09174007 1.09613757 1.09376918 1.09760590 1.09757560 1.09486525 1.09701623 1.09692007 1.09366099 1.09177590 1.09787086 1.09480203 1.09192718 1.09471631 1.09474276 1.09659782 1.09554380 1.07584717</array>
                     <array dataType="xsd:double" dictRef="cc:displacement" size="121095">-0.0000167094 -0.0005467377 0.0008002297 -0.0004689082 -0.0018468847 -0.0032072812 -0.0002606236 -0.0009024545 -0.0007131828 0.0002984028 -0.0000945920 0.0020067363 -0.0000474591 0.0006686257 0.0043088731 -0.0003027160 -0.0009173518 0.0041868525 0.0003322714 -0.0001520165 0.0028718595 0.0016233376 -0.0019541763 0.0028421039 0.0010505175 -0.0019152170 0.0034840146 0.0041278255 -0.0031870125 0.0019818126 0.0000543312 -0.0033218090 0.0083261134 0.0019492225 0.0014804914 0.0104022616 -0.0000005125 0.0013689911 -0.0043062803 0.0072891958 0.0130403777 0.0192730258 0.0259773304 0.0025038408 0.0014622058 -0.0056074218 -0.0381213631 0.1417429563 -0.0062156285 0.0042493861 -0.0259786255 -0.0088189997 -0.0041065384 -0.0164130409 -0.0061282697 0.0020247761 0.0388978407 -0.0241992826 0.0124220288 -0.0118383741 0.0041288710 -0.0004642925 -0.0110961053 0.0085696986 -0.0007797213 0.0117155322 -0.0216712120 -0.0052104706 -0.0017988448 -0.0316185402 0.0239341109 -0.0229386093 -0.0033287063 0.0020019374 -0.0135619982 0.0199567009 -0.0164289086 0.0264626667 0.0266413224 -0.0476121625 0.0989286560 0.1566852851 -0.2264013428 0.3979253499 -0.0818801629 0.0031227934 -0.0335533786 0.0239514537 -0.0870183175 0.1157908957 -0.0023148835 -0.0078510184 -0.0305491217 -0.0065126899 -0.0218394626 0.0308210184 0.0048349714 -0.0851729571 0.0521416367 -0.0005626718 -0.0504377571 -0.0178800766 -0.0130871710 -0.0007122584 -0.0252488881 -0.0322081301 -0.0070599398 0.0444914947 0.0113992828 -0.0988742414 0.0659792185 0.0078750413 -0.0603445370 -0.0614759141 -0.0336575872 0.0176646221 -0.0716415193 0.0000938377 0.0071407459 -0.0700441448 -0.0179005523 0.0097177039 0.0051950543 -0.0472302356 0.0043599441 -0.0324674904 0.0003280678 -0.0004062721 0.0013375644 -0.1560490570 0.2495674372 -0.4465732196 -0.0276409140 0.1052520905 -0.0663088157 -0.0045597628 -0.0416259705 0.0326034431 0.0576247741 0.0192989671 -0.0168167991 -0.0065158427 -0.0136509780 -0.0077510261 -0.0125391197 -0.0076332513 -0.0195529063 -0.0119944981 -0.0064914866 -0.0025172807 0.0441818665 -0.0109454140 -0.0215349433 -0.0073032385 -0.0108294640 0.0256398527 -0.0177147476 -0.0131908281 -0.0123728058 0.0022279761 -0.0265231495 -0.0167350435 -0.0083430005 -0.0004611162 0.0002778605 0.0005106806 -0.0001526828 -0.0174484916 -0.0068913854 -0.0258216753 -0.0285466351 -0.0243330363 -0.0146888572 -0.0106718706 -0.0116760717 -0.0087807613 -0.0103844382 -0.0169339322 0.0022843794 0.0091571400 -0.0119794144 -0.0134944110 -0.0061266928 -0.0305156974 -0.0203249875 0.0113776623 -0.0106232050 -0.0644428515 0.0124391879 0.0007605250 -0.0267565695 0.0134234712 -0.0005343526 -0.0014252521 -0.0004110793 -0.0016403988 -0.0044573925 0.0018914805 -0.0028578046 -0.0051099667 0.0019002851 -0.0009479726 -0.0019674178 -0.0007516868 -0.0000235542 0.0006503220 -0.0021475780 -0.0001773185 0.0003336811 -0.0013391905 -0.0047641114 -0.0096391768 0.0063467516 -0.0049638496 -0.0136516954 0.0077431332 -0.0013970052 0.0007350016 -0.0011554228 0.0011092605 0.0061168306 -0.0070528637 0.0021750493 0.0042761687 -0.0050057437 -0.0015408350 0.0019445824 0.0006449229 -0.0038845159 0.0073454109 -0.0009892410 -0.0038057517 0.0069646062 -0.0013854575 -0.0041338004 0.0057262740 -0.0003188558 -0.0016728952 0.0023586694 0.0012176007 0.0030915263 -0.0038854872 0.0026595101 -0.0046876240 0.0060163812 -0.0019094746 -0.0029981898 0.0015496545 0.0007304193 -0.0092777735 0.0130832625 -0.0021580213 -0.0030329434 0.0036322535 0.0001917715 0.0004075054 -0.0048877916 0.0051100947 0.0009761604 0.0087842195 -0.0036882155 0.0013512772 -0.0093010227 0.0097860007 -0.0018691313 0.0044057997 0.0035905726 -0.0001454402 -0.0006490239 0.0000404479 -0.0000112166 -0.0006120731 0.0004398668 -0.0002141466 -0.0005979113 -0.0001367858 -0.0000368302 -0.0003302499 0.0000499159 -0.0004789094 -0.0009196346 -0.0009644972 -0.0001678594 -0.0004422480 -0.0004878864 0.0001306392 -0.0003816580 0.0002086715 0.0000934564 -0.0002777984 0.0001736682 0.0001445984 -0.0005881941 -0.0002369481 0.0000590934 -0.0003921549 -0.0002927706 0.0004937487 -0.0003823213 0.0021853685 0.0007328872 -0.0005349500 0.0024987587 0.0008111481 -0.0002527621 0.0016899472 0.0010664513 0.0002603024 0.0016702845 0.0017230208 -0.0011510119 0.0000854548 0.0023405077 -0.0001654732 0.0006454095 0.0013505802 0.0000437955 0.0021419915 0.0012431474 0.0003397641 0.0019785769 0.0030723697 -0.0007229275 0.0015196069 0.0026127742 -0.0000645067 0.0012128308 -0.0144398943 0.1063345951 -0.1109337300 -0.0336043542 -0.0084879471 -0.0158778151 -0.0621015698 -0.0062450617 -0.0580670514 0.2234590628 0.2705204663 -0.0402037536 -0.0659499963 0.0911192189 -0.0800232083 -0.3053665442 0.1327587630 0.0998659717 0.0864471066 -0.0131018816 -0.0386390200 -0.0060534755 0.0424192692 -0.0235478253 0.0153836142 -0.0017492218 0.0308805892 -0.0014283159 -0.0037923414 -0.0040346467 0.0075662814 -0.0035936448 -0.0022302310 0.0323441720 -0.0060796248 -0.0038123437 0.0267201615 -0.0017770317 0.0308808898 0.0338703992 -0.0046300837 0.0063433160 0.0498952174 -0.0117853788 -0.0102048192 0.0804741639 -0.0240010130 -0.0170345502 0.0493819437 -0.0096805747 0.0045385827 0.0910968358 -0.0277734759 -0.0189994775 0.0044793168 0.0051344108 0.0252974780 0.0327188272 -0.0003460774 0.0585418763 0.0110466774 0.0116666143 0.0580505246 0.0196990772 0.0095539295 0.0673155432 -0.0041230835 0.0264161896 0.0649561814 -0.0336905151 0.0089020288 -0.0249588893 0.0615674704 0.0015103689 0.0477955052 0.0426904883 0.0022595501 0.0305992386 -0.0064325398 0.0039081851 -0.0138278321 0.0375064240 0.0040599431 0.0426321143 0.0247351181 0.0008967135 -0.0036587860 -0.0006153900 0.0022724421 -0.0262358090 0.0134452991 0.0049632962 0.0210801176 0.0515557450 0.0044618101 0.0698877199 0.0298417722 -0.0008769061 -0.0125681556 -0.0160716353 0.0023666950 -0.0531987076 -0.0301146213 0.0056291121 -0.0312613465 -0.0415094781 0.0021595290 -0.0443942368 -0.0373851796 -0.0005500095 -0.0520835649 -0.0519350153 0.0017405643 -0.0559043373 -0.0686824901 0.0014289727 -0.0785419653 -0.0643522398 0.0019374743 -0.0853140005 -0.0473632602 0.0011589478 -0.0369860224 -0.0553913607 0.0010000608 -0.0478472936 -0.0728719351 0.0020083139 -0.0971066467 -0.0671793914 0.0021991574 -0.0991663021 -0.0357550214 0.0006733027 -0.0117486250 -0.0493590548 -0.0002092137 -0.0307624296 -0.0825810161 0.0024620434 -0.1205416639 -0.0750442646 0.0012299869 -0.0870663971 0.0062521621 0.0059235184 0.0338709189 0.0087892499 0.0127407481 0.0535133716 0.0345786248 0.0003549611 0.0223527857 -0.0588125265 0.0083430083 -0.0363249861 -0.0826348217 0.0095373575 -0.0374315098 -0.0923634093 0.0183631229 -0.0207436271 -0.0893835013 0.0119090967 0.0001498084 -0.1056141815 0.0148860807 0.0559945039 -0.0455052208 -0.0262637556 -0.0110641746 -0.1155479686 0.0439476201 -0.0308559037 -0.0972321151 0.0013185353 -0.0580085950 -0.1196963729 0.0006007239 -0.0587531814 -0.0676737166 0.0118924139 0.0654715968 -0.1193268353 0.0172563876 0.0951453976 -0.1394916036 0.0177473039 0.0420476326 -0.0301872965 -0.0182032734 -0.0379944819 -0.0388251041 -0.0425931034 0.0047713148 -0.0393113286 -0.0362007247 -0.0042021721 -0.1082029041 0.0413457316 -0.0679820225 -0.1154886882 0.0424358178 -0.0203486700 -0.1399788870 0.0691485600 -0.0250441515 -0.1126879601 0.0020189065 -0.0550823452 -0.1280183412 -0.0068910246 -0.0783303567 -0.1354634878 0.0052933943 -0.0444609210 0.0118511219 -0.0032689056 0.0525455780 0.0183763399 0.0236304252 0.0360073725 0.0190330224 0.0254018623 0.0414871840 0.0126501866 -0.0014601982 0.0652562476 0.0050781658 -0.0309123091 0.0872830934 0.0048243690 -0.0312663301 0.0806553395 0.0232076128 0.0433068794 0.0158605274 0.0240336096 0.0467618180 0.0259787565 0.0121847751 -0.0028284879 0.0649670622 -0.0003491988 -0.0526686938 0.1068474327 -0.0001408027 -0.0526805659 0.0941858893 0.0355657478 0.0248520008 0.0309224826 0.0237109783 0.0367439698 0.0436761656 0.0122585798 0.0222619038 0.0488098691 0.0105041669 -0.0013560644 0.0410440154 0.0213487520 -0.0110000216 0.0276215653 0.0468499729 0.0347126499 0.0266203600 0.0243100133 0.0555269469 0.0497514366 0.0029843886 0.0300735460 0.0619974723 0.0011142817 -0.0120101569 0.0456575023 0.0206880673 -0.0289523663 0.0212727589 0.0019648317 -0.0403366864 0.0877413281 0.0214263137 0.0324513190 0.0406773510 -0.0067139630 0.0143015202 0.0704960650 0.0061384523 0.0505801201 0.0637446397 0.0096872087 -0.0066324806 -0.0367012502 0.0215544620 -0.0080254497 -0.0387234250 -0.0008475819 -0.0094439148 -0.0729824027 -0.0003386459 -0.0138636616 -0.1109305028 -0.0099316319 -0.0082320323 -0.0707720081 -0.0087573836 -0.0162279125 -0.1391381510 0.0213013809 -0.0125065395 -0.0785130616 0.0104741199 -0.0154886203 -0.1137740781 0.0295567145 -0.0137556504 -0.0810830780 0.0100255924 -0.0191782984 -0.1442974524 0.0872953072 -0.0282957441 -0.0328658704 0.1020540499 -0.0341447453 -0.0377001777 0.1136532495 -0.0402720694 -0.0508068992 0.1524169135 -0.0572970813 -0.0746822468 0.1036781520 -0.0361029854 -0.0458179959 0.1727444500 -0.0665073853 -0.0886074471 0.1411334297 -0.0512753533 -0.0624883901 0.1662301245 -0.0629771054 -0.0812148904 0.1517846082 -0.0554229847 -0.0663330105 0.1968835504 -0.0766172639 -0.1005115277 -0.0538353593 -0.0004975192 -0.0542746546 -0.0320448245 -0.0032151571 -0.0534161911 -0.0601012487 -0.0076632901 -0.0735683199 -0.0648928958 0.0033110532 -0.0495068950 -0.0467343887 0.0170579195 -0.0124294030 -0.0594312441 0.0228085903 -0.0016512085 -0.0422523519 0.0200187486 -0.0033506811 -0.0293234424 0.0145706840 -0.0125767679 -0.0065877750 -0.0068330948 0.0423529890 -0.0209221485 0.0235485759 0.0839149423 -0.0100546420 0.0181471567 0.0717416746 0.0140779115 -0.0007920654 0.0318833286 0.0056589181 -0.0126348298 0.0306448838 0.0427363822 -0.0204396025 -0.0124564796 0.0302022367 -0.0175964277 0.0063424997 0.0756650149 -0.0654358396 -0.0529318663 0.0619996058 -0.0415060977 -0.0390530839 0.0898705044 -0.0820213473 -0.0744000121 0.0342714943 -0.0064246877 -0.0047352512 0.0090751087 -0.0267547339 0.0206609540 0.0161824811 -0.0345410847 0.0252370548 0.0416975669 -0.0583732772 0.0410942362 -0.0180013797 -0.0324523072 0.0317987868 -0.0579999773 0.0252337402 0.0194719676 -0.0730286273 -0.0102646177 0.0645677173 -0.0701184753 -0.0012027718 0.0542903989 -0.0635294780 0.0203626048 0.0304104242 -0.0471119602 -0.0127351049 0.0683388719 -0.0884033759 0.0207213611 0.0290617378 -0.0859977460 0.0320752860 0.0159271161 -0.0426465143 -0.0021594955 0.0572367878 -0.0317991578 -0.0305775333 0.0897973648 -0.1036338211 0.0280786838 0.0203604617 -0.1031073882 0.0505992018 -0.0059781845 -0.0599354678 0.0274829476 0.0232189948 -0.0464831000 0.0299654543 0.0400580809 -0.0476635228 0.0295827661 0.0543728150 -0.0423988787 0.0337561802 0.0368852624 -0.0303915027 0.0419127653 0.0319760745 -0.0281410786 0.0365284022 0.0703929943 -0.0523878990 0.0353358446 -0.0016175691 -0.0460530264 0.0393432703 -0.0044147310 -0.0218535771 0.0404414482 0.0684573460 -0.0219991564 0.0357115938 0.0987360188 -0.0676831145 0.0350453565 -0.0350627391 -0.0528976392 0.0389699645 -0.0372125071 -0.0106766489 0.0423434236 0.0955567700 -0.0261783357 0.0446106000 0.0302800048 -0.0198291685 -0.0120703887 0.0724185778 -0.0196658612 -0.0248317941 0.0623738529 0.0581261144 -0.0325673891 -0.0468838704 -0.0150504596 0.0410582462 0.0259647356 -0.0104810469 0.0409354515 0.0278135034 -0.0151083309 0.0470326284 0.0201576480 -0.0132582381 0.0437712142 -0.0405422388 -0.0161158630 0.0571452257 0.0123341727 -0.0327425953 -0.0360167283 -0.0805418645 0.0106726910 0.1142567010 -0.1081409824 -0.0039129165 0.0337830227 0.0412127716 -0.0017693864 0.0333958709 0.0426789708 -0.0107872555 0.0281258401 0.0330550698 -0.0172773626 0.0658699654 0.0039916100 -0.0215059956 0.0845077168 0.0300576174 -0.0330648035 -0.0394541267 -0.1144947629 -0.0337186533 -0.0387261560 -0.0957252103 -0.0355811306 -0.0682444340 -0.0524503498 0.0056542781 0.1022339982 -0.1364327394 0.0113093180 0.1190337259 -0.1539304151 0.0301609159 0.1673257860 -0.0801238795 -0.0133212735 0.0344852297 0.0411797386 0.0027189773 0.0280957637 0.0540934386 0.0075086396 0.0364482890 0.0340583008 -0.0141105425 -0.0253901341 0.0088186511 0.0168832872 -0.0436755016 -0.0145783767 0.0111275498 -0.0566625915 -0.0567004076 -0.0245228398 -0.0466014456 -0.0781453100 -0.0544053538 -0.0269261252 -0.0570854573 -0.0495817966 -0.0176877615 -0.0119927534 0.0431056751 -0.0489480882 0.0006267687 0.0335607441 -0.0743391706 -0.0724317787 -0.0322895395 -0.0571946890 -0.1206303755 -0.0827149110 -0.0192720833 -0.0754366511 -0.0740658624 -0.0025295169 0.0060593640 0.0470363891 -0.0126426923 -0.0536458256 0.0383565010 0.0065823936 -0.0602884469 0.0417822415 0.0036846765 -0.0597486211 0.0521885177 -0.0158668480 -0.0530062150 0.0607075570 -0.0330331905 -0.0465054983 0.0458437688 -0.0091609189 -0.0548563696 0.0296798257 0.0232375126 -0.0661060045 0.0347078358 0.0192989837 -0.0646825937 0.0546331325 -0.0174596477 -0.0528038732 0.0695348975 -0.0472263133 -0.0412789500 -0.0527901895 -0.0014262753 -0.1654124555 -0.0179762329 -0.1199213822 -0.1068986520 0.0261422000 0.0329655328 -0.0727562956 0.0382735113 0.0165120051 -0.0596959053 0.0003264363 0.0374491743 0.0830935772 0.0119613495 0.0257461613 0.0557811306 -0.0012631302 0.0679601726 0.1175258332 0.0096301270 0.0855605494 0.1225116775 -0.0114320944 0.0774341470 0.1401172147 0.0087350264 0.1091380046 0.1501896123 0.0231555077 0.0431831060 0.0563390577 0.0216823904 0.0723727506 0.0898439725 0.0340159384 0.0336047508 0.0314884319 0.0302255743 0.0853867101 0.0913313801 0.0409918979 -0.0418615784 -0.0031374530 0.0687849221 -0.0668070334 -0.0376178933 0.0275243512 -0.0452461116 0.0204864865 0.0451954011 -0.0720643674 0.0052273372 0.0036768993 -0.0261124933 0.0512793053 0.0347007793 -0.0737660799 0.0229537221 0.0868502431 -0.0942645055 -0.0533472937 0.0767324635 -0.0972357368 -0.0331414614 0.1088483263 -0.1135591180 -0.0817341131 0.0914503692 -0.1187587337 -0.0457789808 -0.0066550733 0.0339257020 0.0435363045 -0.0163170488 0.0351701517 0.0431535069 -0.0076847589 0.0273119039 0.0598290451 0.0120542660 0.0341333971 0.0402084440 -0.0184818299 0.0418574107 0.0117556865 -0.0105979685 0.0358126574 0.0042282105 -0.0222010450 0.0429601825 0.0099137060 -0.0242304371 0.0462447857 0.0066210398 0.0271225001 -0.0292776221 -0.0599900872 0.0263981055 -0.0648053913 -0.1399967353 0.0255257281 -0.0498198200 -0.1016887183 0.0256739619 -0.0078916009 -0.0050984750 0.0268820206 -0.0111892889 -0.0163070665 0.0257503262 0.0015626958 0.0347424837 0.0207687415 0.0100749084 0.0246908797 -0.0059832586 0.0454162135 0.0741837901 0.0211770315 0.0128850567 0.0512082129 -0.0152570479 0.0587348014 0.0923432688 0.0266542650 -0.0115990193 0.0310012984 0.0279648842 0.0002280651 0.0068947436 0.0215897897 -0.0175603724 0.0358768278 0.0370070575 -0.0110227120 0.0598192064 -0.0000610347 -0.0390176315 0.0329258132 -0.0585175316 0.0490862704 -0.0028840366 -0.0280890982 0.0158339351 0.0611018403 -0.0385586056 0.0266462008 0.0368273496 -0.0620225515 0.0511292651 -0.0150159857 -0.0162649920 0.0146838967 0.0622662328 -0.0728940494 0.0513556144 -0.0172414319 -0.0864518975 0.0648489503 -0.0462925749 -0.0262716277 0.0265954300 0.0373722333 0.0113421039 -0.0053299668 0.1065100226 -0.0875515699 0.0588700273 -0.0347350808 -0.1163782064 0.0855280155 -0.0898436340 -0.0652143192 0.0524264967 -0.0180312129 -0.0526935666 0.0409841484 -0.0015895937 -0.0609737429 0.0487182039 -0.0092090697 -0.0379792151 0.0369608847 0.0292007290 -0.0021324859 0.0309044035 0.0961988097 -0.0350217924 0.0396131025 0.0362398249 -0.0227357783 0.0309138981 0.0573360964 -0.0049274312 0.0281118202 0.0897096938 -0.0171901904 0.0367789053 0.0694608990 -0.0465075510 0.0442821238 0.0159542297 -0.0238630629 0.0292638400 0.0548067839 0.0079910527 0.0231062241 0.1084733240 -0.0150750360 0.0394630121 0.0746971059 0.0114610778 0.0286427085 0.1222670138 0.0001632578 0.0142167729 0.0664708313 0.0001710411 -0.0063543323 0.0617828753 0.0422653490 -0.0024543610 0.0271452072 -0.0285758682 0.0030121957 -0.0462661174 -0.0349330591 -0.0177809757 -0.0170255442 -0.0459913365 -0.0069569471 -0.0084195130 -0.0435340081 -0.0093745606 0.0174408810 -0.0630056707 -0.0172867430 0.0434137500 -0.0060362893 -0.0127760565 0.0205971196 -0.0678845609 -0.0060260313 0.0140352283 -0.0322888883 -0.0503606454 0.0004292331 -0.0383231979 -0.0748643212 0.0419205488 -0.0338969374 -0.0063236925 0.0413528291 -0.0725638615 -0.0260891589 0.0845474362 -0.0962676038 -0.0257850884 0.0214331862 0.0151372376 0.0018284277 0.0184570080 0.0016364391 -0.0345492743 0.0294108893 -0.0152160336 -0.0020772970 0.0138669556 -0.0642498102 -0.0068155526 -0.0024825268 -0.0692785252 -0.0055341658 0.0315078199 -0.0866277383 -0.0034563288 0.0110043029 -0.0483019817 -0.0509830990 0.0704067092 -0.0363611344 -0.0972017510 0.0487658891 -0.0341466103 -0.0969819878 0.0385620513 0.0260388997 -0.0295085541 -0.0526223929 0.0110931074 -0.0404849558 -0.0334832014 0.0067075488 -0.0504476632 -0.0117546713 0.0185624324 -0.0476492324 -0.0106742346 0.0333503241 -0.0351025535 -0.0316554642 0.0366649044 -0.0264630964 -0.0524092380 0.0033118796 -0.0430664571 -0.0329128937 -0.0047193063 -0.0619867889 0.0061282800 0.0177177669 -0.0597583146 0.0166542932 0.0426946065 -0.0330256396 -0.0302201172 0.0483508888 -0.0181552398 -0.0673593432 0.0051570354 0.0086215684 -0.0125952956 0.0169228039 0.0143427942 -0.0559887346 0.0657537587 0.0108209851 -0.0586256064 0.1063765682 -0.0060224340 -0.0171183426 0.0952585430 -0.0150536035 0.0267033479 -0.0359496533 0.0173771744 -0.0128746170 -0.0126726833 0.0250700154 -0.0887507070 0.0741485735 0.0280351709 -0.1085653292 0.1461679404 -0.0100670333 -0.0199068570 0.1267567093 -0.0262332600 0.0582672359 0.0330775858 -0.0540199621 0.0175676386 0.0019969568 -0.0745196325 0.0380500863 0.0970531467 0.0614741327 -0.1267020450 0.0579666804 0.0081158785 -0.1291327335 0.0228536067 -0.0531005392 -0.0922931099 0.0236301361 -0.0299639741 -0.0356810339 0.0195768100 -0.0801501919 -0.1374548154 0.0162915184 -0.0835442414 -0.1240035903 0.0197683582 -0.0986628357 -0.1833390873 0.0132977108 -0.1046861771 -0.1601825858 0.0204666787 -0.0331630686 -0.0173143606 0.0171028371 -0.0592390153 -0.0609208423 0.0201515118 -0.0157927494 0.0293098483 0.0146737893 -0.0615650902 -0.0472065359 0.0006838181 0.0408140706 0.0399758149 -0.0208142459 0.0630358600 0.0725621628 -0.0051186066 0.0559004636 0.0246130541 -0.0375476813 0.0944335077 0.0502331659 0.0144113462 0.0365508361 -0.0085914755 -0.0424363175 0.1051429601 0.0397408246 -0.0542334159 0.1034910335 0.0993469952 -0.0650087414 0.1195569046 0.0897420527 -0.0711714138 0.1218942335 0.1279760018 -0.0924109954 0.1505586623 0.1112480280 -0.0165852764 -0.0135649557 -0.0617441599 -0.0115652213 0.0045206039 -0.0758095020 -0.0217418003 -0.0273008641 -0.0482186007 -0.0060929103 -0.0294728611 -0.0752802663 -0.0237562241 0.0241806386 -0.0603507072 -0.0216042438 0.0082267039 -0.0681559887 -0.0282897433 0.0425366214 -0.0412398866 -0.0154034834 0.0391241795 -0.0823871106 0.0013932164 0.0089743225 0.0085103167 0.0117244887 -0.0086720759 -0.0115759877 0.0042230550 -0.0067951673 -0.0079148016 -0.0140337368 -0.0005755231 0.0013291463 -0.0084309367 0.0104040569 0.0101490231 -0.0260779025 0.0057353806 -0.0076926987 -0.0228831884 -0.0008036315 -0.0019071032 -0.0347269314 -0.0041899713 -0.0133015482 -0.0240869701 -0.0001563525 -0.0183602066 -0.0377328529 -0.0076891498 -0.0201712016 -0.0319943320 0.0181459924 -0.0018828532 -0.0104763860 0.0198773248 0.0179444812 -0.0248955479 0.0273756010 0.0171272454 -0.0201167734 0.0279289456 0.0241900963 -0.0344199883 0.0395012864 0.0227281788 -0.0054176005 -0.0423271418 0.0264158990 0.0242955478 -0.0482646933 0.0689809157 0.0211038883 -0.0499895117 0.0685061389 0.0106817639 -0.0535691380 0.0637803097 0.0009896372 -0.0389356548 0.0439148707 0.0363624338 -0.0630448754 0.0915707767 0.0315755371 -0.0652027904 0.0911394644 -0.0058714052 -0.0405295898 0.0395937506 -0.0118008619 -0.0284582519 0.0239686623 0.0509285326 -0.0706391548 0.1074805840 0.0447668096 -0.0750832622 0.1104227626 0.0035700760 -0.0461591791 0.0484658193 -0.0005216972 -0.0318828600 0.0437205386 0.0040764399 -0.0375323964 0.0584678404 -0.0134639410 -0.0201849481 -0.0009703497 -0.0392284867 0.0007643185 -0.0939397230 -0.0198784766 -0.0100238191 -0.0166625273 -0.0196228393 -0.0194476658 -0.0321082994 -0.0317566271 -0.0093698193 -0.0769779981 -0.0329760381 0.0002716127 -0.0634690293 -0.0153790371 -0.0103693674 0.0072742689 -0.0133895216 -0.0274307988 -0.0195996968 -0.0340347216 -0.0104698334 -0.0955625887 -0.0383149005 0.0075119107 -0.0761503318 -0.0489478990 0.0083629026 -0.1298562477 -0.0326902913 -0.0283837409 0.0111708209 -0.0320742743 -0.0041074230 0.0122815206 -0.0028199910 -0.0145245669 -0.0432751951 -0.0110971868 0.0312978208 0.0776008559 -0.0016928888 0.0622173422 0.0381941465 0.0034575939 0.0597595647 0.0077806915 0.0005080939 0.0686799396 -0.0184022877 0.0054043892 0.0839554391 0.0189326545 -0.0185596347 0.0161704891 -0.0446809982 0.0056097334 0.1159908996 -0.0637535197 0.0000756091 0.0953428157 0.0263935507 0.0029564460 0.1293669542 -0.0305095681 -0.0082062502 0.0499822135 0.0397969286 0.0110591564 0.0947553170 -0.0131595102 0.0178563558 0.1162094682 0.0486779457 -0.0248951790 0.0095589984 -0.0663997801 -0.0212358885 0.0193008205 -0.0582216540 -0.0185851858 -0.0120050337 -0.0207050858 0.0036101461 0.1075904334 -0.0890145032 0.0052377218 0.1201545107 -0.0887641372 0.0128259235 0.1528388893 -0.0457057036 0.0045686851 0.0973057265 -0.0713604767 0.0031436051 0.1509863064 -0.0322126243 0.0033662297 0.1658914189 -0.0316818933 0.0089854013 0.0250969641 0.0242393501 0.0044390464 0.0584430964 0.0159397712 0.0126444608 0.0780532101 0.0269601331 0.0235104097 0.0577419638 0.0501873728 0.0278128411 0.0216031162 0.0632527201 0.0211114546 0.0070658044 0.0485256774 -0.0070521336 0.0690796621 -0.0001587918 0.0083887108 0.1067080806 0.0179173974 0.0274302975 0.0674545611 0.0623339543 0.0365023613 0.0051891034 0.0828986268 0.0253666758 -0.0197104838 0.0551576516 -0.0294522002 -0.0133358046 -0.0741804342 0.0020378451 -0.0517180102 -0.0986254464 0.0611716128 -0.0893324353 -0.0914019242 0.0856895262 -0.0813025363 -0.0620495004 0.0530038583 -0.0420456901 -0.0383914874 -0.0733161812 0.0126721451 -0.0804662480 -0.0169383764 -0.0563682808 -0.1230193388 0.0971988348 -0.1401697735 -0.1152127954 0.1310586312 -0.1093189368 -0.0571793124 0.0738397701 -0.0384666542 -0.0146003189 0.0263453806 0.0117321165 0.1003013030 0.0310408405 0.1276042054 0.0325834557 0.1383615629 -0.1283559361 -0.1209172774 0.0833282518 -0.1891620675 -0.1292278683 -0.0029461413 -0.0203407134 -0.0189362620 -0.0120420384 -0.0162923000 -0.0103710577 -0.0014885236 -0.0386080226 -0.0380233602 -0.0094560674 -0.0521411461 -0.0470612735 0.0060742878 -0.0419478455 -0.0456467081 -0.0084955788 -0.0663778905 -0.0625212397 -0.0201025338 -0.0296591384 -0.0167054749 -0.0187421660 -0.0471397240 -0.0352108143 -0.0279398818 -0.0260149233 -0.0077022016 -0.0250192858 -0.0571523390 -0.0408559210 -0.0280781184 -0.0071880207 -0.0009232560 -0.0391211546 -0.0057734953 -0.0025618112 -0.0243398983 -0.0127293805 0.0022010519 -0.0351805490 -0.0150161648 0.0072407388 -0.0133336249 -0.0152909964 0.0005300335 -0.0324265546 -0.0193481054 0.0103921048 -0.0506817448 -0.0079117542 0.0030856508 -0.0497033344 -0.0120158378 0.0084343535 -0.0599634266 -0.0062051203 0.0027954537 -0.0588947651 -0.0134138223 0.0129899947 -0.0209781500 0.0489212340 0.1162930557 -0.0353164762 0.0227741490 0.1369910755 -0.0146062597 0.0639767483 0.1061401561 -0.0232271161 0.0751833489 0.1358736382 -0.0170546799 -0.0022837628 0.0967691677 -0.0262100706 0.0067973017 0.1076337851 -0.0033267076 -0.0248290561 0.0825991164 -0.0277974155 -0.0143206829 0.1138757417 -0.0478469782 -0.0162840966 0.0044668057 -0.0711615684 0.0110074792 0.0230175747 -0.0553904285 0.0060539118 0.0127792346 -0.0161943917 -0.0039554514 -0.0081274675 -0.0281685357 -0.0216895620 -0.0068589288 0.0177233718 -0.0204554516 -0.0006342537 0.0056521672 -0.0057750500 -0.0069701612 0.0484937719 -0.0129937597 0.0000489883 0.0394434001 -0.0239783610 0.0032504894 0.0633239575 -0.0147882306 0.0029219132 0.0096369221 -0.0366015604 0.0008382459 -0.0200772345 -0.0421152880 -0.0092382369 -0.0011300041 -0.0514396082 -0.0099477926 -0.0045045743 -0.0555418881 -0.0169649093 0.0072246163 -0.0589790895 -0.0141054325 0.0205520953 0.0074885139 -0.0140814170 -0.0442134225 -0.0655711608 0.0719070038 -0.0374892738 -0.0457454345 0.0501146459 -0.0175511050 0.0031920482 0.0013173815 -0.0191583641 -0.0528908179 0.0284745645 -0.0473365055 -0.0138282067 0.0449739731 -0.0382700559 0.0115655449 0.0187563276 -0.0088257942 -0.0287145544 0.0036538216 -0.0117521082 -0.0777324501 0.0315522420 -0.0608460970 -0.0088398883 0.0624531032 -0.0458740641 0.0372105952 0.0162318018 0.0006454253 0.0216930503 -0.0123674424 -0.0043181862 0.0460020034 -0.0167059748 -0.0285658356 0.0674829836 -0.0295909989 0.0209882204 0.0610726723 -0.0236415163 0.0588786618 0.0889628886 -0.0489008864 0.0045120238 0.0937561916 -0.0627210498 0.0594113878 0.0425772933 0.0063519745 0.0768883548 0.0565135275 -0.0074244508 0.0232974644 0.1072830040 -0.0746299029 -0.0240963343 0.1082612413 -0.0850063096 0.0775137786 0.0149292196 0.0428097455 0.1005561586 0.0453927112 0.0141113598 0.0099219662 0.1323558458 -0.1061873906 0.0740448957 0.1005549537 -0.0607648761 0.0104713330 -0.0343378336 -0.0149862427 0.0102220751 -0.0506212481 -0.0174416664 0.0460439519 -0.0347074379 0.0062276692 -0.0564485876 0.0238854862 -0.0246126888 -0.0284591777 0.0231955388 -0.0222947393 0.0026152118 -0.0162300212 -0.0078945310 0.0203853813 -0.0719999435 0.0573957968 -0.0245697329 -0.1258915996 -0.0052840586 0.0581923371 0.0054600088 0.0994918620 0.0405648586 -0.1552152756 0.1370818374 -0.0287704122 0.0656705588 -0.0423872760 0.0006936563 0.0732466225 -0.0519132350 -0.0301211430 -0.0841192934 -0.0352615677 -0.0178281369 -0.1672573911 0.0291566001 -0.0504833746 -0.1585565119 -0.0417465352 0.0725656004 0.0185252639 0.1281255718 0.0635033941 -0.0073296110 0.1171421206 0.0503652743 0.0431894840 0.0690000284 0.0713016018 -0.1159916193 0.1764487222 0.0563783882 -0.1942307940 0.1876058669 0.0078508004 -0.2128796997 0.1041022095 0.0406277796 0.0623482130 -0.0560802236 -0.0048952158 0.1106169136 -0.0692229696 -0.0121969026 0.0538251474 -0.0397895844 -0.0511816129 -0.0224789274 0.0122512886 -0.0774701835 -0.0518328500 0.0489056982 -0.0670916074 -0.0287761963 0.0479914512 -0.0320292409 0.0202021859 0.0122851541 -0.0088667662 0.0405911803 -0.0214466546 -0.0183823484 0.0193505775 -0.0221700349 -0.1010900582 -0.0831449763 0.0754481030 -0.0837031592 -0.0412373699 0.0717711153 -0.0169082060 0.0703721889 0.0027406949 0.0183724731 0.0791499729 -0.0493955412 0.0015980001 0.0405032495 -0.0504528259 0.0329321901 -0.0140053687 -0.0026070526 0.0329059106 -0.0109569753 -0.0080146944 0.0476164619 -0.0304739578 -0.0032058497 0.0618360141 -0.0530565664 0.0071890038 0.0613517823 -0.0551981717 0.0120919831 0.0221910746 0.0018455228 -0.0075299193 0.0222105464 0.0057021526 -0.0162871932 0.0482895719 -0.0286185509 -0.0095956535 0.0735662711 -0.0680556561 0.0110320555 0.0726428549 -0.0716237555 0.0195170421 0.0077443185 0.1096390341 -0.0167960456 -0.0299525962 0.0739753407 0.0136190568 0.0496739235 -0.0204465666 -0.0142116578 0.0480048622 -0.0365155758 -0.0093772587 -0.0438272160 0.0243777199 0.0074753029 -0.0239245109 0.0190081479 -0.0035933650 -0.0517819824 0.0491777394 0.0152766241 -0.0396137831 0.0675757904 0.0123684005 -0.0678997754 0.0532840686 0.0240746414 -0.0454875850 0.0863053897 0.0189398287 -0.0115917831 0.0383892187 -0.0071383578 -0.0193415264 0.0620508895 0.0007390681 0.0043549528 0.0347462508 -0.0151083454 -0.0094402285 0.0767165840 -0.0018255211 0.0150592156 0.0056234679 -0.0092690864 0.0384227133 0.0020359319 -0.0069286809 0.0021852023 0.0202048044 -0.0136324698 0.0141948370 0.0305973038 -0.0174186784 -0.0174719212 0.0233332153 -0.0139320656 0.0039895007 0.0418199107 -0.0211870204 0.0506666948 0.0131260951 -0.0111066988 0.0393987987 0.0268821234 -0.0165935565 0.0693441515 0.0101142216 -0.0097431006 0.0491487806 0.0348956697 -0.0199507228 -0.0922874654 0.0626052326 -0.0353559423 -0.1060956978 0.0626512902 -0.0344226354 -0.0766881172 0.0971926546 -0.0484517666 -0.1250400279 0.0594280537 -0.0316760835 -0.0656652767 -0.0207879333 -0.0015869101 -0.0886152490 -0.0312588884 0.0102184531 -0.0382508069 -0.0411393907 0.0019718466 -0.0807139292 -0.0223777823 0.0037691486 0.0244492986 0.0220083884 -0.0068260510 0.0443826925 0.0215373436 0.0282670967 0.0326886095 0.0177628009 0.0169637727 0.0011750726 0.0083314424 -0.0084339912 0.0087372987 0.0179372739 -0.0162771104 -0.0123447558 0.0118892654 -0.0092378861 -0.0075381284 0.0079427640 -0.0103884240 0.0036925199 -0.0047655480 -0.0253125013 -0.0067539825 0.0062149752 -0.0164969442 0.0096297580 -0.0104705599 -0.0322962070 -0.0208497485 0.0174256757 -0.0029423524 0.0019921620 0.0327306646 -0.0214538332 -0.0165044540 0.0213964705 0.0121306121 -0.0006548612 0.0408981236 0.0461089623 -0.0455228225 -0.0087852394 0.0075952862 -0.0359862851 -0.0612411584 -0.0368561481 -0.0610035371 -0.0969148095 0.0252426750 -0.0604841009 -0.0867673970 0.0116259044 -0.0587423772 -0.0626863621 -0.0207387393 -0.0477811415 -0.0916282945 0.0081736522 -0.0717692319 -0.0691644412 -0.0025553705 -0.0720759513 -0.0561299947 -0.0190787909 -0.0468178634 -0.0793494110 -0.0084822401 -0.0396575346 -0.1056563555 0.0171734503 -0.0798953211 -0.0657119865 0.0002858431 -0.0823042781 -0.0403931972 -0.0302530133 -0.0469267482 -0.0526623950 -0.0282190320 -0.0250762968 -0.0410354980 -0.0011015939 -0.0427303933 -0.0283587708 0.0141254729 0.0083830671 -0.0280407596 0.0076563804 0.0815001265 -0.0036421391 0.0400911869 0.0143454539 0.0013196889 0.0212524724 0.0402602287 -0.0451545758 0.0116256009 0.0764811076 -0.0330137652 0.0277625812 0.0502136584 0.0138738945 0.0363310453 -0.0084305821 0.0144049119 0.0211406119 0.0395032956 -0.0672283210 0.0073501254 0.0978454364 -0.0448415155 0.0294814215 0.0540634564 0.0377620135 0.0464286115 0.1095869581 0.0059872767 0.0524901601 -0.0412911339 -0.0822878236 -0.0105659804 -0.0399292581 -0.0741986836 -0.0041948509 -0.0079392817 0.0064755355 -0.0146175075 0.0267366426 -0.0350822882 -0.0376953190 -0.0061434069 -0.0392725212 -0.0314472954 -0.0471446280 0.0138184209 -0.0723203074 -0.0651641617 0.0705846580 0.0323095686 -0.0497096920 0.0882646710 0.0479616844 0.0094314954 0.1101261787 0.0603924108 -0.1799616166 0.0384291222 0.0631878746 -0.0011307104 -0.0986364190 0.0014131861 -0.0299583319 -0.1210724803 0.0367959636 -0.0037232849 0.1138675347 0.0384179667 -0.0709952083 0.0994904408 0.0989011215 -0.0704461127 0.0579491473 0.0157010795 0.0235316673 0.1195181881 0.0513088434 0.0176061542 0.0993108856 0.1007750092 0.0268753306 0.1305995634 0.0375547041 -0.1994697200 0.0146724972 0.0427216663 -0.2023211247 0.0753005427 0.1279953077 -0.2155579945 0.0061025115 0.0408526796 -0.0670131429 -0.0959744536 0.0603927896 -0.0245875406 -0.1658757333 0.0541097462 -0.0185100617 -0.1218066856 0.0266017699 0.0334157714 0.0344899732 -0.0166535571 0.0068142414 -0.0032389117 0.0233628777 0.0152646496 0.0147210228 0.0213832525 0.0487760798 0.0711707972 -0.0221894109 0.0757469159 0.1086128344 -0.0677954284 0.0680350584 0.0899312662 -0.0652817856 -0.0216087776 -0.0443143517 0.0593916790 -0.0036882081 -0.0115177989 0.0543623170 0.0563348777 0.0946296086 -0.0151849520 0.1030804279 0.1536380308 -0.1020580895 0.0881802556 0.1201555782 -0.0973488497 -0.0049103528 0.0061244156 -0.0113815992 -0.0008727992 -0.0046708140 -0.0047784809 -0.0007772570 -0.0137909800 -0.0019589196 -0.0052204012 -0.0099495578 -0.0061095511 -0.0092401306 0.0012356331 -0.0127290095 -0.0044678288 0.0121403689 -0.0135775332 0.0015527557 -0.0057681875 -0.0021324400 0.0032657917 -0.0276382376 0.0065160036 -0.0049913896 -0.0165695200 -0.0039268396 -0.0124004633 0.0031727683 -0.0157881830 0.0865016143 0.1617144237 -0.0528548904 0.0320257264 0.0451917260 0.0292367030 0.0066046247 -0.0402540207 0.0137549556 0.0036570206 -0.0258104013 0.0067254475 0.0260565012 0.0091379354 0.0251930581 0.0095904655 0.0027393347 0.0074933340 0.0355639460 0.0072859576 0.0518535966 0.0295672984 -0.0008354774 0.0592653761 0.0479046546 0.0128837934 0.0667936525 0.0372029814 -0.0017517873 0.0809119158 0.0034398001 -0.0067579090 0.0114592988 0.0130631932 -0.0084371029 0.0373200125 -0.0081547109 -0.0124441161 -0.0053062048 0.0079881891 -0.0156986099 0.0411731102 -0.0000778460 -0.0018223964 -0.0154792949 0.0077196534 -0.0089084895 -0.0254864792 0.0022540120 -0.0065338501 -0.0114780585 0.0145198388 -0.0188430963 -0.0206438128 -0.0052726661 -0.0000795757 -0.0007229339 0.0163077569 -0.0220190669 -0.0180159936 0.0205046372 -0.0219320654 -0.0352494890 0.0248844995 -0.0271446745 -0.0334145188 0.0269228493 -0.0279644097 -0.0442998740 0.0353535628 -0.0372928894 -0.0412440551 0.0714408697 -0.0836870069 -0.0258038168 0.1014079316 -0.0931377453 -0.0197863421 0.0496435382 -0.1253965814 -0.0289942488 0.1008407604 -0.0677309562 -0.0197586303 0.0445842925 0.0257655042 -0.0572700715 0.0629443827 0.0335632093 -0.0672037076 0.0141380367 0.0625523862 -0.0435258435 0.0756781420 0.0324619432 -0.0725308844 0.0028921226 -0.0111216003 -0.0112615137 -0.0067628396 0.0163123416 0.0316429832 0.0002650932 0.0072515250 0.0094421116 0.0159669530 -0.0089253077 -0.0314705195 0.0099206024 -0.0198635810 -0.0343354056 0.0311085523 -0.0169784431 -0.0354495990 0.0201644352 -0.0082237538 -0.0313610688 0.0083343054 0.0117948275 -0.0082928529 0.0230255646 -0.0067527753 -0.0214452521 0.0005182583 0.0203011405 0.0024917526 0.0424070467 -0.0261121057 -0.0453579624 0.0131062083 -0.0337874707 -0.0457163212 0.0284669833 -0.0428020393 -0.0467872546 0.0416640830 -0.0654673733 -0.0456643223 0.0114766758 -0.0350074242 -0.0413554925 -0.0575490129 0.0113208746 -0.0654042574 -0.0442948156 -0.1006353047 0.1163087963 -0.0499177068 -0.0734584701 0.0737790135 -0.0625681720 -0.0054898521 -0.0286266254 -0.0242499082 -0.0846264119 0.0617964882 -0.0818086024 -0.0291758030 0.0323756813 -0.0895138024 0.0065556227 -0.0217517015 -0.0289554935 -0.0504198338 0.0106183645 0.0011377477 -0.1201227060 0.0944688284 -0.1000677427 -0.0216143187 0.0428298643 -0.1180938320 0.0444382049 -0.0558692948 -0.0627847902 0.0166236261 -0.0571282859 -0.0427685160 0.0225065239 -0.0324146095 -0.0485054013 0.0258385664 -0.0145995686 -0.0261076557 0.0229863361 -0.0131116280 0.0141356458 0.0191932172 0.0555088795 -0.0106504138 0.0242605330 0.0237023516 -0.0237939860 0.0211162451 -0.0193488771 -0.0026152419 0.0188429327 0.0165864063 0.0091154303 0.0222802296 0.0569102293 -0.0135948378 0.0264999985 0.0285541965 -0.0377810417 0.0208310654 -0.0498249346 0.0012288564 0.0166795508 0.0173406208 0.0213351923 0.0228174938 0.0864624174 0.0308475209 0.0173110726 0.0848562495 -0.0044691268 -0.0594447685 -0.0000910692 -0.0055425397 -0.0655358871 -0.0168605982 0.0186286385 -0.0094348863 -0.0051478293 -0.0042203398 0.0064650415 -0.0547496095 0.0020584242 -0.0089010106 -0.0331639740 0.0049573215 -0.0160863348 -0.0098429276 0.0084966699 -0.0224012209 -0.1137661178 0.0147828565 -0.0052650513 -0.0714341081 -0.0341028668 -0.1036269240 -0.1568435336 0.0616061172 0.0613766104 -0.1946997673 0.0061579639 -0.0217034190 -0.0215759120 0.0158856763 -0.0406313642 0.0117671079 0.0071868000 -0.0381306486 -0.0502086674 0.0178367459 0.0083061648 -0.0990710128 0.0249900117 0.0259741252 -0.0434963919 -0.0311679700 -0.1040863299 -0.1755379027 -0.0350660582 -0.1083902914 -0.1765162934 -0.0442691074 -0.1297926917 -0.1312706557 0.0568320943 0.0504753577 -0.2198183114 0.0657341714 0.0625377669 -0.2664016455 0.0977486558 0.1286040377 -0.1567262981 0.0154795520 -0.0235080244 0.0336918002 0.0186350540 -0.0476715812 0.0191451203 0.0214949587 -0.0656392616 0.0069975535 0.0032120737 -0.0072623843 0.0186760594 -0.0138703234 0.0297345836 0.0209398448 -0.0027747041 0.0564935858 0.0476185350 0.0215901307 0.0317809368 0.0800466435 0.0351994326 -0.0161209820 0.0889940723 0.0268287176 -0.0323743835 0.0547692649 -0.0353929490 0.0418410887 -0.0012838437 -0.0154470510 0.0929360489 0.0440323599 0.0302268069 0.0503790977 0.1092173116 0.0535513694 -0.0378683309 0.1175278434 0.0406700707 -0.0662866099 0.0547881278 0.0251404967 0.0103509181 0.0090426567 0.0166502727 0.0126242587 0.0309819975 0.0012388417 -0.0080025385 0.0383536556 -0.0044980490 -0.0312098965 0.0260989481 0.0042708633 -0.0312000996 0.0038253666 0.0363445522 0.0273913446 0.0021177743 0.0212066393 0.0304844523 0.0414859691 -0.0096681747 -0.0040809571 0.0616034404 -0.0150126731 -0.0487303642 0.0330724748 -0.0005835628 -0.0492599038 -0.0070824693 0.0448649505 -0.0063240825 0.1524171969 0.0217167270 0.1189454139 0.0869741018 -0.0285303355 -0.0163618760 0.0678200107 0.0006408803 0.0099866983 0.0742929574 0.0076446965 0.0203501809 0.0139958355 0.0157354589 0.0123781100 -0.0047426212 0.0086832571 0.0456047512 0.0498423643 0.0184120707 0.0632992810 0.0696867744 0.0022564876 0.0516657262 0.0643020930 0.0197999727 0.0833454998 0.0996193190 0.0260025201 0.0306579254 0.0149465136 0.0275891245 0.0558923605 0.0521391591 0.0325803420 0.0262562107 0.0043077663 0.0364745743 0.0709249003 0.0688074454 -0.0030650735 0.0155886066 -0.0148020883 -0.0073339373 0.0239675523 -0.0023233793 -0.0314158906 0.0357530281 -0.0062451867 -0.0631477000 0.0629330986 0.0162635480 -0.0304703665 0.0307204668 -0.0158203807 -0.0867123700 0.0789605356 0.0236916947 -0.0376668738 0.0506117441 0.0198559533 -0.0660582803 0.0705294951 0.0299863051 -0.0407322262 0.0564929346 0.0298817767 -0.0913790394 0.0923481354 0.0483076402 0.0008267536 -0.0002231562 -0.0554574794 -0.0020262731 0.0070983377 -0.0606098915 -0.0006037872 -0.0062195951 -0.0434932699 0.0105972571 -0.0070091525 -0.0622244032 -0.0049136648 0.0115468162 -0.0654576975 0.0069770758 0.0238982102 -0.0691623485 -0.0146688978 0.0087364941 -0.0791414422 -0.0058750607 0.0048329465 -0.0556088950 0.0755278972 0.0264689128 -0.0589769768 0.1013736613 0.0350001653 0.0054662118 0.0862315933 0.0284059006 -0.0136866126 0.0445718025 0.0120096653 -0.0532258268 0.0550457229 0.0210821810 -0.0719599342 0.0145623626 0.0217138384 -0.0565194059 0.0216131597 0.0145554412 -0.0537403565 -0.0099151071 0.0240418386 -0.0502495629 -0.0016704821 0.0274724997 -0.0542686207 -0.0206646879 0.0270080254 -0.0496486689 0.0162299746 0.0260611268 -0.0570090961 0.0457419332 0.0406099111 -0.0808344144 0.0173113652 0.0280666425 -0.0388322334 0.0386292543 0.0477161365 0.0028986406 -0.0247018652 -0.0023956464 -0.0411242545 -0.0402184723 -0.0182582333 0.0227559727 -0.0586431149 -0.0269198155 0.0189219515 -0.0517584130 -0.0264257163 0.0241223883 -0.0355834564 -0.0246847595 0.0336272962 -0.0442142452 -0.0300599409 0.0260581182 -0.0498729229 -0.0229850646 0.0291728187 -0.0413509409 -0.0221148017 0.0346584990 -0.0362119849 -0.0282873198 0.0309325283 -0.0452486503 -0.0334087045 0.0224655994 -0.0546730950 -0.0207327460 0.0285242653 -0.0399609238 -0.0191773281 0.0384730603 -0.0344839885 -0.0215483950 0.0302528605 -0.0388720612 -0.0199509017 0.0241961581 -0.0305266182 -0.0275201246 0.0304065247 -0.0527680839 -0.0207645262 0.0059344810 -0.0917150155 -0.0162397121 -0.0657728739 -0.0774239550 -0.0182826380 -0.0523368233 -0.0417779879 -0.0238677826 0.0388865003 -0.0624922818 -0.0209092659 0.0015478245 -0.0973623878 -0.0153080589 -0.0883369905 -0.0818718935 -0.0179105761 -0.0732678641 -0.0139605615 -0.0297022207 0.0983904171 -0.0509194508 -0.0245553670 0.0264346423 -0.1172997832 -0.0119507257 -0.1364565259 -0.1078396337 -0.0136601124 -0.0962273034 -0.0335711472 -0.0300621795 0.0292874831 -0.0343498472 -0.0247041616 0.0023894530 -0.0104845676 0.0352799578 -0.0469939498 -0.0335261983 0.0067277015 0.0429689896 -0.0240635067 0.0334151977 0.0055469839 -0.0179412893 0.0346770499 -0.0365913015 -0.0007155372 -0.0203279880 0.0491511239 -0.0479549309 -0.0672995423 0.0199661011 0.0484589359 0.0322188877 0.0807403653 0.0010157561 -0.0829161535 0.1093317586 -0.0209897174 0.0657940793 -0.0029860586 -0.0189749963 0.0995278461 -0.0599628747 -0.0206580990 -0.0195682571 -0.0075823517 -0.0546532476 -0.1030833218 0.0886028138 -0.0955206532 -0.1070972001 -0.0320130622 0.0615493769 0.0439818985 0.1049452676 0.0537287391 0.0181962047 0.0891994622 0.0359375244 0.0595394755 0.0602384224 0.0338262234 -0.0477194604 0.1255494465 0.0153852084 -0.1196934420 0.1655665248 -0.0445749522 -0.1253984051 0.0803274488 -0.0216110514 0.0679386418 -0.1010252654 -0.0175284027 0.1185646457 -0.0583232729 -0.0164601386 0.1383134488 -0.0629262555 0.0749175564 0.0228833307 -0.0621311201 0.0589886123 -0.0116707442 -0.0330934711 0.0418539559 -0.0525490542 0.0015269253 0.0416332795 -0.0567798865 0.0055396759 0.0588685703 -0.0117476434 -0.0336982824 0.0764492290 0.0294442262 -0.0689901426 0.0564315827 -0.0155673134 -0.0296210304 0.0289672367 -0.0879086202 0.0322442890 0.0274597244 -0.1244961566 0.0621324703 0.0594230582 -0.0157310792 -0.0295973680 0.0893557853 0.0581365815 -0.0933345232 0.0015968453 0.0355715015 -0.0326811092 -0.0009339582 0.0293076219 -0.0138810487 -0.0169761559 0.0218631989 -0.0104277931 -0.0316019063 0.0258284156 -0.0260163188 -0.0287432105 0.0333522063 -0.0448104946 0.0141649275 0.0389999427 -0.0348646240 0.0101881338 0.0267852569 -0.0012580257 -0.0168158793 0.0053513992 0.0137144324 -0.0436898592 0.0206048617 -0.0230125695 -0.0397919866 0.0338638447 -0.0568936461 0.0243858863 -0.1814363036 0.1012482051 0.0198026567 -0.1231070773 0.0689791533 -0.0264763814 -0.0045183981 0.0189482797 -0.0071643324 0.0011478949 0.0278968567 0.0809387716 0.0252197018 0.0184877371 0.0593384565 0.0148151749 -0.0086498562 0.0989708122 0.0366297329 0.0881243413 0.0969803851 0.0392128993 0.1300399462 0.1156038386 0.0453791960 0.1112014833 0.1115696219 0.0501158087 0.1876374057 0.0574150144 0.0149987873 0.0267127697 0.0760402814 0.0274434352 0.0967756238 0.0422628307 0.0068662403 0.0033081052 0.0748125165 0.0286378079 0.1277064398 0.0020498737 0.0168849248 -0.0424249560 -0.0111406187 0.0200336894 -0.0423017518 -0.0112425977 0.0192876811 -0.0275269579 -0.0340657741 0.0230361835 -0.0150278259 -0.0049919122 0.0196962213 -0.0239177812 -0.0455590440 0.0260021392 -0.0034985708 -0.0321763221 0.0220634234 -0.0305647908 -0.0432802669 0.0237513230 -0.0167892343 -0.0417022510 0.0233293957 -0.0317748191 -0.0606846557 0.0263330203 -0.0069946946 -0.0401966481 0.0199581392 0.0709577786 -0.0494724854 0.0001352958 0.0865844755 -0.0350459535 0.0324752066 0.0629027483 -0.0429238261 0.0393505193 0.0855739314 -0.0413915324 -0.0085858609 0.0376221328 -0.0434553012 -0.0181193465 0.0349991657 -0.0371168325 -0.0111931306 0.0377026246 -0.0538828660 -0.0058012868 0.0364879476 -0.0338251197 -0.0477367493 -0.0167968373 -0.0544798803 -0.0425840677 -0.0415835176 -0.0407273765 -0.0385790853 -0.0290841350 -0.0046752255 -0.0234110863 0.0066139370 -0.0156061494 -0.0429891162 -0.0025030408 0.0376202329 -0.0412139217 0.0101618151 0.0149088988 -0.0220791786 0.0133832229 0.0614292677 -0.0368889256 0.0089331352 0.0605501222 -0.0502068432 0.0064520652 0.0769979267 -0.0404771568 0.0092249236 0.0321079819 -0.0505391048 0.0112793141 -0.0071978138 -0.0584837849 0.0036876980 0.0129207169 -0.0777269341 0.0161757270 0.0281013492 -0.0902977440 0.0267450785 0.0000154179 -0.0899767270 0.0140656633 0.0326620335 -0.0616530375 0.0365139649 -0.1199368005 0.0344789973 -0.2168838058 -0.0832111338 0.0118362732 -0.1540974901 0.0072364027 -0.0465797610 -0.0004050679 -0.0572276262 -0.0031802620 -0.1062154971 -0.0610559136 -0.0021460531 -0.1179252636 -0.0135344667 -0.0342080476 -0.0367037413 -0.0119394300 -0.0321225504 -0.0271832448 -0.0736532620 0.0083794509 -0.1326459910 -0.0771749488 0.0072801609 -0.1477247115 0.0054544204 -0.0496978449 -0.0097361965 0.0323924682 -0.0619646382 0.0366404125 0.0255735201 -0.0574454387 0.0248920309 0.0458050608 -0.0762400246 0.0449874224 -0.0003760098 -0.0609183098 -0.0046047007 -0.0719652273 -0.0647466635 -0.0997193274 -0.0117259197 -0.0755503102 -0.0316970277 -0.0210324526 -0.0505573909 -0.0193770058 -0.0569872477 -0.0519986693 -0.0655086889 -0.0482522071 -0.0765663914 -0.0804283173 0.0077112120 -0.0856949817 -0.0182889060 -0.0092273540 -0.0426293532 0.0064098342 -0.0724594610 -0.0438422434 -0.0733806672 -0.0578951748 -0.0864736125 -0.1041392972 -0.1009310720 -0.0656120186 -0.1387511948 0.0114130860 -0.0438509388 0.0151814118 0.0130624756 -0.0646020479 0.0168683039 0.0580991389 -0.0455035078 0.0028704856 0.0488125996 0.0030747277 0.0755405744 0.0326081255 0.0338209636 0.0305244500 0.0148771773 0.0652735234 -0.0158206651 0.0151518522 0.0551920264 0.0179796279 0.0107190848 0.0575461069 0.0396784259 0.0407202143 0.0258908951 0.0094540202 0.0011828744 0.0765332857 -0.0022715155 0.0301057063 0.0413190044 0.0260437516 0.0061255370 0.0758340174 -0.0355474558 0.0321156642 0.0615100571 0.0400360686 0.0017399290 0.0583909062 0.0661909929 -0.0057294396 0.0492478550 0.0257277027 0.0269856479 0.0134208300 -0.0224877072 0.0376855648 0.0409727068 0.0257938057 0.0663503257 0.0078172791 0.0173258524 0.0077399821 0.0763273954 -0.0270904357 0.0022114196 0.0734751207 0.0047229633 -0.0159578886 0.0942395827 0.0018526361 -0.0206487406 0.0464707146 -0.0799252616 0.0085882133 0.0720140501 -0.0290178886 0.0119388413 0.1363509605 -0.0419270523 -0.0322015005 -0.0429362279 -0.0043560308 -0.0771800496 -0.0673409618 0.0485327194 -0.0620169009 -0.0319560177 0.0657698941 -0.0052287693 0.0215231982 0.0329832652 0.0383571973 0.0405476873 -0.0207977343 0.0246498983 0.0101082693 -0.0419660988 -0.1204023697 -0.1062572491 0.0768101544 -0.0941689004 -0.0452712743 0.1067223693 0.0088093807 0.0586821235 0.0645682497 0.0844567674 0.0820573707 -0.0444414059 0.0599451165 0.0301490944 -0.0849101733 0.0547834731 -0.0385370025 0.0010713808 0.0261758373 0.0193712552 -0.0142087056 0.0006787652 0.0700844030 -0.0277794181 0.0072391704 0.0511258835 -0.0249639689 0.0380820505 -0.0097093537 -0.0079366345 0.0712308579 -0.0680979313 0.0104982771 0.0215793305 0.0319364430 -0.0160991127 -0.0333262397 0.1466890093 -0.0455368038 -0.0138370647 0.0906394242 -0.0363882247 0.0415375399 -0.0175001044 -0.0062089541 0.0482037686 0.0704573713 0.0675229112 -0.0204154625 0.0731552924 0.0852015991 -0.0542617055 0.1441029947 -0.0443928184 -0.0388811508 0.2086784085 -0.0605859558 -0.0307882255 -0.0204243776 -0.0217916496 -0.0113671443 -0.0112558665 0.0023857349 -0.0394656003 -0.0092889418 -0.0337084061 -0.0278406182 0.0108496575 -0.0181446680 -0.0555531786 -0.0170392258 -0.0543058363 -0.0342777411 0.0189578561 -0.0269319535 0.0009075743 0.0099417874 0.0203631272 -0.0072036281 0.0210263801 0.0108820738 0.0174957668 0.0170458909 0.0410028871 0.0025995300 0.0372074489 0.0253565833 0.0086893276 -0.0051252624 0.0195002692 0.0334327561 -0.0114749524 0.0176483039 -0.0271840244 0.0209361538 0.0286510270 -0.0408680974 0.0439801104 0.0410624392 -0.0468957834 0.0232293255 0.0259119303 -0.0711158579 0.0647317731 0.0503070509 0.0223226554 0.0118626840 0.0288386239 -0.0161857747 0.0399865488 0.0414098690 0.0426101875 0.0079088146 0.0290496911 -0.0273944250 0.0583165411 0.0514881332 0.0684010141 -0.0123928402 0.1087493891 0.0740124829 -0.0338186901 0.1245038052 0.0608534631 -0.0266019632 0.1063042649 0.0877619524 0.0108174646 0.1221516674 0.0438796036 0.0235903813 0.0446815422 0.0600474485 0.0002943466 0.0243856859 0.0314758446 0.0414421703 0.0547199496 0.0376755472 0.0425506451 0.0199201569 0.0072036005 -0.0041261673 0.0079900852 0.0166657890 0.0013303755 0.0373463997 0.0117026284 -0.0046481325 0.0214382083 0.0005500902 -0.0184500714 -0.0182414865 0.0021771127 -0.0138287862 -0.0129575197 0.0022711100 -0.0217738504 -0.0178298097 -0.0005238746 -0.0187572921 -0.0188750169 -0.0056235113 -0.0087224031 -0.0059918701 -0.0006839540 -0.0167411335 -0.0107296503 -0.0092089194 -0.0044861681 -0.0005069734 0.0075757983 -0.0266172490 -0.0222228046 0.0028229956 -0.0207541932 -0.0217803594 0.0128743889 -0.0192972544 -0.0326023256 0.0018726629 -0.0194715501 -0.0468468749 0.0292913819 -0.0067351410 -0.0318111586 -0.0428120580 0.0783102166 0.0142300647 0.1366080823 0.0748202204 0.0900013753 0.1053460211 0.0717255204 0.0675074570 0.0274050489 0.0673476192 0.0119281898 0.0726578546 0.0861784097 0.0601302872 0.0970288435 0.0540601861 0.0445868669 0.0577038992 0.0523617078 0.0135970232 0.0343542629 0.0825392342 0.0331747107 0.0803886343 0.0999301339 0.0817116671 0.1183492176 0.0441280427 0.0471986276 0.0506907243 0.0382324459 -0.0047856270 -0.0132378613 0.0568040953 0.0026176321 -0.0188663468 0.0124908298 -0.0021434997 0.0089059269 -0.0085233852 -0.0210631360 -0.0700414244 -0.0140345983 0.0089688906 -0.1641114089 -0.0659631121 0.0259204597 -0.0793605632 -0.0655869136 -0.0122873700 -0.1078906944 0.0099751135 0.0402773312 -0.1547424337 -0.0151441969 0.0476250179 -0.1257593406 -0.0915727357 -0.0034804747 -0.0506333626 -0.0848007925 -0.0370537193 -0.1029261522 0.0536108205 0.0561858218 -0.1800884133 0.0025329430 0.0629844248 -0.1324320208 -0.1314472746 -0.0208839400 -0.2023107089 -0.0868837495 0.0318681439 0.0180368415 0.0896864829 0.0315512195 0.0140266105 0.0826727359 0.0087159897 -0.0002870840 -0.0218435957 -0.0020909401 -0.0070678585 0.0054654596 -0.0177084601 -0.0010349701 0.0090729685 -0.0219038839 0.0027576743 0.0064699424 -0.0303271237 0.0082304743 -0.0084897256 -0.0430885997 0.0090758297 -0.0112692293 -0.0565757974 -0.0055598869 -0.0022188962 -0.0414795740 0.0302143253 -0.0126388756 -0.0389196370 0.0033470870 0.0141214410 -0.0184964518 0.0004551123 0.0249751954 -0.0370247648 0.0013505613 -0.0110665875 -0.0580898889 0.0119564559 -0.0105602525 -0.0662211142 0.0174724579 -0.0108121847 -0.0522849590 -0.0297143105 -0.0191111996 -0.0443891377 -0.0128795553 0.0278540196 -0.0322149649 0.0167898194 -0.0031100471 -0.0467346575 0.0297101411 -0.0091696929 -0.0236860580 0.0329011493 -0.0165174539 -0.0509375263 0.0428688239 -0.0157345694 -0.0374793260 -0.0163540444 0.0151102189 -0.0537291145 0.0051347864 0.0218744407 -0.0255405234 0.0103961760 0.0454833753 -0.0465992881 0.0142782860 0.0087168664 0.0089735864 -0.0161870667 -0.0284643131 0.0521411639 -0.0136585033 -0.0254230069 0.0650073362 0.0231274678 0.0371116165 0.0169848892 0.0588343919 0.0880968668 -0.0434552718 0.0507302930 0.0659010962 -0.0406542386 -0.0403268704 -0.0626175352 0.0819907734 -0.0374085746 -0.0670636435 0.1110528076 0.0271219150 0.0512138119 0.0395581452 0.0902500666 0.1424295244 -0.0852931445 0.0724287274 0.0984088727 -0.0751355568 -0.0027288097 -0.0040488391 0.0009494267 -0.0006395919 -0.0141310504 0.0123993750 0.0037221320 -0.0423492441 0.0207098339 0.0063892234 -0.0605291092 0.0191795890 0.0043172233 -0.0495310563 0.0072466892 -0.0055518457 0.0174265757 -0.0065466361 -0.0023594645 -0.0003791947 0.0141122339 0.0031776888 -0.0484260113 0.0301969138 0.0101308554 -0.0829504703 0.0264653479 0.0066231984 -0.0645333766 0.0051083583 0.1169665151 0.3762987985 -0.1617064246 -0.0605322940 -0.2624048285 0.2562684275 -0.0031625161 -0.0467444506 0.0289018548 0.0084797035 -0.0534146629 0.0381170161 0.0086402898 -0.0119249581 0.0085163671 0.0026347949 -0.0194383957 -0.0112913361 0.0114145562 -0.0131798976 0.0152295143 0.0070243397 -0.0218350585 0.0025412371 0.0172462183 -0.0073699119 0.0301268239 0.0089540298 -0.0227899365 0.0070733546 -0.0019197651 -0.0274361958 -0.0215427318 0.0005053319 -0.0287885743 -0.0160442494 -0.0082337454 -0.0317964498 -0.0335730145 -0.0026711224 -0.0345071189 -0.0256037648 -0.0057994554 -0.0102596649 -0.0145347433 -0.0086833394 -0.0053580569 -0.0071714131 -0.0100271302 -0.0051439268 -0.0165024106 -0.0184268441 0.0045970410 -0.0099946347 -0.0072404713 -0.0086964960 -0.0225764295 -0.0221029384 0.0086112312 -0.0113163751 -0.0171532773 0.0044017365 -0.0005465833 -0.0223457438 0.0096763925 -0.0015004348 -0.0199726822 0.0080986288 0.0054099276 -0.0292274572 0.0177400199 0.0039553813 -0.0080772077 0.0082351579 -0.0098954868 -0.0188291387 0.0112461527 -0.0117149873 -0.0051994050 0.0102823372 0.0020654568 0.0001613575 0.0046131612 -0.0141046508 -0.0077361637 -0.0028845385 -0.0120053892 -0.0094939101 0.0075876235 -0.0067317883 -0.0065368088 -0.0111789063 -0.0213171209 -0.0084355616 -0.0115083039 0.0000973077 -0.0318179474 -0.0422031487 -0.0572758204 -0.0350845019 -0.0321922644 -0.0408833827 -0.0318446422 -0.0319443731 -0.0396498382 -0.0227769066 -0.0296269104 -0.0321315562 -0.0247430806 -0.0382564185 -0.0462333935 -0.0047816537 -0.0437062149 -0.0286957258 -0.0185676603 -0.0291370010 -0.0292018337 0.0375701267 -0.0499323325 -0.0396007272 0.0241260032 -0.0534713807 -0.0320950670 0.0573189180 -0.0575448058 -0.0442823341 -0.0168288839 -0.0561034970 -0.0237921650 -0.0203536342 -0.0423421906 -0.0402605234 -0.0112896954 -0.0472945160 -0.0349880127 -0.0207372532 -0.0296298415 -0.0347929596 0.0128425393 -0.0502486071 -0.0405913941 0.0226773372 0.0822810696 -0.0147861143 0.1118172530 0.0596889013 0.0609252279 0.0944185483 0.0626544407 0.0420445165 0.0536277788 0.0729243722 -0.0024700039 0.0625706822 0.0788232013 0.0057885715 0.1022067345 0.0518340705 0.0520495563 0.0814880637 0.0572824727 0.0273488557 0.0421648103 0.0821233189 -0.0157590869 0.0572896518 0.0877655126 0.0003899530 0.1219832703 0.0413429299 0.0762690748 0.0882592870 0.0483499743 0.0348910440 0.0386615625 0.0720986133 -0.0101351534 0.0412486073 0.0510291867 -0.0053495064 0.0496754439 0.0453205624 -0.0178793496 0.0210030944 0.0377477182 0.0068040059 -0.0169620828 0.0093501388 0.0344994455 0.0066249327 0.0159963702 -0.0268514649 0.0162394977 0.0447575263 0.0557746298 -0.0020554947 0.0308690505 0.0695977429 -0.0124690283 0.0019754908 -0.0138088189 0.0103873496 0.0101165027 -0.0641777591 0.0291021633 0.0579824061 0.0858778849 -0.0029555132 0.0364190632 0.1079773862 -0.0236830850 -0.0147941433 -0.0413886604 -0.0315329492 -0.0015991563 0.0452488344 0.0287391380 0.0905655949 -0.0399684327 0.0283059025 0.0702339353 -0.0372619576 0.0247744159 -0.0627692424 -0.0179878638 0.0525691643 0.0416352417 -0.0276997720 0.0039672542 0.0236611550 -0.0021271716 -0.0238990770 0.0498121358 0.0392783505 -0.0366918498 0.0926202057 0.0521650200 0.0089792427 0.1233535866 0.0329638196 -0.0037895241 0.0793434314 0.0516363900 -0.0973448283 0.0957073142 0.0480789010 -0.0179006337 -0.0282155343 -0.0170352381 -0.0723494745 -0.0522988225 0.0185420338 0.0471763796 0.1614539245 0.0120824016 -0.0133355828 0.1504236363 0.0662954102 0.0222480884 0.0722646041 0.0010145134 0.0116166838 0.0871520803 0.0296163689 0.0031907864 0.0627743937 0.0689507756 0.0064955005 0.0752709094 0.0517897560 -0.1165315659 0.0720573099 0.0268704048 -0.1136279716 0.1257560848 0.0686671551 -0.1078968503 0.0929757264 0.0444424543 -0.0850850034 -0.0268260574 0.0483035111 -0.0827222204 -0.0974962793 -0.0025020254 -0.0906702535 -0.0539158957 0.0352974554 -0.0314184689 -0.0411461041 -0.0560626441 -0.0603504843 -0.0559871862 -0.0223345260 -0.0567895077 -0.0460765023 -0.0008723369 -0.0256425158 -0.0276821073 -0.0083243793 0.0038833636 -0.0106017670 -0.0468661830 0.0014434727 -0.0135573529 -0.0744226220 -0.0822951859 -0.0720173501 -0.0118779594 -0.0782584981 -0.0574294217 0.0272393542 -0.0225773596 -0.0351377326 0.0380522784 0.0298606264 0.0033610439 -0.0509600605 0.0255461030 0.0020503942 -0.1045329686 0.0099661947 -0.0085183611 -0.0180930912 0.0048738893 -0.0089016840 -0.0020397279 0.0141262110 -0.0625506110 0.0138555487 0.0287522798 -0.1182614643 0.0163398517 0.0347557236 -0.1167737423 0.0000629752 0.0043039601 0.0360300795 -0.0336458186 -0.0069186145 0.0352931504 -0.0039295090 0.0021762124 -0.0500334457 0.0262804814 0.0347689201 -0.1589874571 0.0294942446 0.0467500245 -0.1585830130 0.0002617400 -0.0165757431 -0.1472040251 0.1188854952 -0.0260021498 0.0674705292 -0.0023461655 -0.0098193541 -0.0692437896 0.0365028661 0.0041393866 -0.0174578145 0.0245775961 -0.0252453272 -0.0148615639 -0.0068544808 -0.0201256287 -0.0155345066 -0.0076596657 -0.0205880369 0.0094717845 0.0392149582 -0.0091456759 0.0337030365 0.0859744684 -0.0252897565 0.0105217163 0.0414060651 -0.0044528158 0.0541851207 0.1263743257 -0.0088916434 0.0060428495 0.0309655609 -0.0032308732 0.0311739021 0.0800661912 -0.0025013282 0.0042106012 0.0262264747 0.0064058827 0.0491244938 0.1148955945 -0.0199804914 -0.0178372933 -0.0261479481 0.0155636872 -0.0298118207 -0.0352264134 -0.0584172427 0.0076424475 -0.0122023321 -0.0578504053 0.0205967225 -0.0097151992 -0.0909727481 0.0179137523 -0.0025668522 -0.0900252619 0.0413784693 0.0022165305 0.0201210631 -0.0184327670 -0.0352981745 -0.0156673930 0.0067420435 -0.0226585039 0.0498387184 -0.0289396788 -0.0440177225 -0.0134757730 0.0164492119 -0.0216305906 0.0800615993 0.0041683884 -0.0606361569 0.1268062213 0.0037130572 -0.0625326858 0.0600203360 -0.0285993844 -0.0860053822 0.0771795815 0.0087154990 -0.0568889877 0.0768319267 0.0874941572 -0.0104473486 0.0802574379 0.1099520617 -0.0041127120 0.0593621351 0.1036624112 -0.0079782273 0.1153769885 0.0815323160 -0.0104092120 0.0207538614 -0.0012599399 0.0161786797 0.0014214964 0.0177305573 0.0222188203 0.0128584616 0.0108993179 0.0063257463 0.0407891010 -0.0123914209 -0.0467056578 0.0348140066 -0.0116685895 -0.0125164610 0.0515075109 -0.0244511107 -0.0855141429 0.0451147287 -0.0258893704 -0.0698937043 0.0193356261 -0.0218411812 -0.0786637123 0.0446574618 -0.0280900714 -0.0953394509 0.0062319282 -0.0186782416 -0.0786655971 0.0374238322 -0.0001673574 -0.0730489884 0.0424508031 -0.0225914024 -0.0019482814 0.0304311754 -0.0110646188 -0.0076233877 0.0599280074 -0.0343208230 0.0149949055 -0.0070517785 0.0185813463 0.0079687260 0.0565434514 -0.0347119347 0.0793719960 0.0251837365 0.0519901298 -0.0578590788 0.0336559920 0.0308954075 -0.0212198806 0.0496990389 -0.0211831971 0.0608946412 0.0187356665 0.0372588216 -0.0101345480 0.0595764056 -0.0019921744 0.0134788749 0.0687336424 -0.0293567819 0.0579498916 0.0255226868 0.0108290264 0.0316496012 -0.0009499862 0.0630580180 -0.0362192148 0.0712750625 -0.0066292415 0.0046984545 0.0903566259 -0.0558735912 0.0845335247 0.0521867305 -0.0323758713 0.0750103711 0.0287677226 -0.0163421378 0.0477304618 0.0128521295 -0.0013523076 0.0256611680 0.0401226515 0.0022471478 0.0175092721 0.0672215976 0.0404935582 -0.0484064322 0.0376944932 0.0334583145 0.0111658732 0.0523998539 -0.0078129929 -0.0167198084 0.0674550829 0.0104486156 -0.0476158055 0.0515149346 0.0522540095 -0.0218818301 0.0246682832 0.0432226486 0.0326533982 0.0479588662 -0.0276912097 -0.0275364203 0.0748907110 0.0025268892 -0.0744380385 0.0492209253 0.0760216960 -0.0266098421 0.0778708917 0.0546519713 -0.0741194719 0.0063201286 0.0170412252 0.0427700851 0.0079531325 0.0287884422 0.0329919608 0.0312736782 -0.0161265485 -0.0851697904 -0.0416122633 -0.0172294611 0.0558393188 -0.0688528246 -0.0241610022 0.0673213831 -0.0780626877 -0.0198041685 0.1091881340 -0.0734861776 -0.0247294372 0.0478453261 -0.0714172186 -0.0188995017 0.0680566556 -0.0452896598 -0.0912545706 0.0180532759 -0.0646344184 0.0239767436 -0.0000560943 -0.0901446932 -0.0393758477 0.0383390054 -0.1210884602 -0.0513737311 0.0562891736 -0.0228533977 0.0064624258 0.0589710856 -0.0913144104 -0.0128852200 0.1214969773 -0.0955771851 -0.0494239461 0.0336812179 -0.0246424480 -0.0819748122 -0.0383592304 -0.0364771062 -0.1125173488 0.0294223401 -0.0289223361 -0.1211219233 0.0389660210 -0.0682137418 0.0137095105 -0.0269673801 -0.0657610999 0.0289820426 -0.0233226235 -0.0606996958 0.0606975059 0.0171350129 -0.0997956399 -0.0393386007 0.0768391630 -0.1366126383 -0.0625557589 0.0195952373 -0.1507192699 -0.0631239414 0.0834924106 0.0118682363 -0.0142684780 0.0370296802 0.0329539615 0.0098296986 0.0075021644 0.0339331931 0.0108990938 -0.0080978047 0.0148523291 -0.0087039728 0.0044637934 -0.0114330176 -0.0460431663 0.0493112877 -0.0136576588 -0.0521131940 0.0688833900 0.0512069647 0.0331879958 -0.0121959650 0.0519016918 0.0372200032 -0.0397843750 0.0223045811 0.0343806578 -0.0538407606 -0.0295415645 -0.0625554506 0.0588650460 -0.0325357903 -0.0782723994 0.0980806804 0.0560062051 -0.0121933054 -0.0548362799 0.0373128375 0.0010808697 -0.0199119991 -0.0086399019 0.0070253912 -0.0182332299 -0.0374890628 0.0061702760 -0.0511645068 -0.0172957245 -0.0038000453 -0.0852659391 0.0905018391 -0.0163196439 -0.0559561675 0.0584318069 0.0046610122 0.0064980422 -0.0271452859 0.0122317313 0.0262820116 -0.0746320086 0.0129342857 -0.0497161017 -0.0404712268 -0.0049035379 -0.1114442044 0.0166592985 0.1099158561 -0.1082895273 0.0335316802 -0.0003882202 -0.0496059352 -0.0621611025 -0.0081753321 0.0367872058 -0.0074566473 0.0357212114 0.0515485608 0.0193258318 0.0155906056 -0.0213726130 0.0344593956 0.0065266595 -0.0403017609 0.0112483958 0.0304311863 -0.0271230127 0.0185227605 0.0390107378 -0.0445824261 -0.0007298538 0.0352943616 -0.0161373868 0.0121332147 0.0501153381 -0.0494240321 0.0431991942 0.0198897707 -0.0475278865 0.0354603801 0.0354728168 -0.0510795203 0.0542681946 0.0190415844 -0.0472050571 0.0428670641 0.0459349861 -0.0577852163 0.0030175487 -0.0118649746 -0.0469636163 -0.0179829940 -0.0046822959 -0.0427811318 -0.0513559898 0.0141801273 -0.0126981457 -0.1440901506 0.0572224556 0.0448397206 -0.0309208903 0.0042299214 -0.0262833307 -0.1947894106 0.0809272715 0.0784044829 -0.1043302128 0.0355981686 0.0122216936 -0.1747957736 0.0707126381 0.0611485495 -0.1234212468 0.0435327444 0.0201013957 -0.2511996055 0.1071084778 0.1098125863 -0.0470994551 -0.0186023064 0.0196004751 -0.0183346561 -0.0189732040 0.0183256088 -0.0517319715 -0.0190283803 -0.0135406415 -0.0762518486 -0.0176796571 0.0255175806 -0.0286680871 -0.0202369384 0.0943422429 -0.0481243066 -0.0132616236 0.1101015722 -0.0188097866 -0.0274180982 0.0953909441 -0.0144863554 -0.0256623742 0.0986083514 0.0016237027 0.0245043792 0.0849994176 -0.0089167022 0.0615367148 0.1461153473 -0.0029071751 0.0437895410 0.1013902369 0.0133876266 -0.0081778925 -0.0142887679 0.0089831508 -0.0013376515 0.0224340320 0.0072609783 -0.0081617553 -0.0185493221 0.0206155643 -0.0173292738 -0.0264529333 -0.0659355916 0.0311612910 0.0237885021 -0.0323984465 0.0146348195 0.0011331429 -0.1041978493 0.0543424850 0.0466304290 0.0171950560 -0.0070096726 -0.0240832671 0.0111252908 -0.0169417324 0.0019597769 0.0176640177 -0.0084330804 -0.0155824683 0.0189810441 -0.0125624283 -0.0168878673 0.0186819062 -0.0027651052 -0.0138241160 0.0063684510 0.0044499131 -0.0912077987 -0.0527249899 -0.1163982652 0.0652026689 -0.0417089596 -0.0887805076 0.0364304867 -0.0117511542 -0.0199660302 -0.0314700701 -0.0095285061 -0.1016937245 0.0141525645 -0.0603953259 -0.0403913273 0.0209697158 -0.0447391857 -0.0057785595 -0.0120221340 0.0043057733 -0.0656450570 -0.0236155977 0.0031874535 -0.1389224388 0.0214868611 -0.0859823793 -0.0298091798 0.0371345957 -0.0614266312 0.0327516167 -0.0253009377 0.0062810980 0.0083452197 -0.0566070886 0.0325758004 0.0227526091 -0.0259448043 0.0364351258 0.0164735638 0.0092629036 0.0310564982 0.0218351693 -0.0295233851 0.0107646972 0.0161564654 -0.0467925693 0.0200365986 0.0177590644 -0.0554021889 0.0338710984 0.0211598417 -0.0100377819 0.0230777466 0.0187661405 -0.0176484980 0.0090609237 0.0155440623 -0.0652145929 0.0193342264 0.0166326422 -0.0705421703 0.0436253552 0.0194484894 0.0119183944 0.0222649720 0.0206796246 -0.0020654501 -0.0003221421 0.0133581270 -0.0879071594 0.0029817098 0.0151431618 -0.0549615392 0.0235799980 -0.0720346557 -0.0534039716 0.0248019850 -0.0712527689 -0.0446022823 -0.0357480062 0.0205304798 -0.0033588613 0.0857812789 0.0628385779 -0.0250868845 0.0403937313 0.0369395053 0.0107585647 0.0282032890 0.0384781214 0.1032158323 0.0289459557 0.0421440194 0.0580329658 0.0674833268 0.0633264123 0.0283312517 0.0040468258 0.0200705753 0.0449578185 0.0485579644 0.0538083148 0.0463649356 0.0052822307 0.0017312622 -0.0317287699 -0.0521327144 -0.0171412850 -0.0060211731 0.0904869793 0.0962939368 0.0090523076 0.0519528824 0.0855421726 0.0471432439 0.0854740827 0.0219072551 0.0058879597 0.0016562236 0.0171564659 0.0408542263 0.0029914211 0.0181714504 0.0328584757 -0.0035114701 0.0119467076 0.0538039996 0.0379707625 0.0463753781 0.0567541822 0.0469181914 0.0606148868 0.0196197657 0.0734286757 0.0605603797 0.0548388875 -0.0480793339 0.0016591775 0.0187351648 -0.0696691135 -0.0515336779 -0.0453861493 -0.0841697609 -0.0164067784 0.0230856380 -0.0076840385 0.0082547409 0.0916204287 0.0157868529 -0.0084939841 0.0749390280 0.0033518105 -0.0406984831 0.0579728752 -0.0315418217 -0.0476032281 0.0530727483 -0.0560359921 -0.0278756169 0.0686791888 -0.0438017431 -0.0031605189 0.0913648572 0.0436429019 0.0000643684 0.0745252411 0.0221040502 -0.0589614042 0.0467262276 -0.0437829476 -0.0826519928 0.0294884009 -0.0855330046 -0.0349945053 0.0646272647 -0.0639566410 0.0086499898 0.1065174364 -0.0684148822 0.0711916969 -0.0252175043 -0.0615866045 0.0648624892 -0.0327811521 -0.0242776417 0.0092214820 -0.0183212309 0.0078229832 -0.0411771140 0.0053453675 0.0016720414 -0.0345291353 0.0123832864 -0.0978283157 0.1152462651 -0.0389517166 -0.0845420988 0.1018693441 -0.0502113500 -0.0185460374 0.0046942667 -0.0273017389 0.0386573636 -0.0856063530 0.0171665506 0.0283500083 -0.0759929079 0.0291538295 -0.0602164461 -0.0079059796 -0.0273354023 -0.0381667681 -0.1840499014 0.0677452468 0.0062983764 -0.0435005400 0.0002742158 -0.0397471084 0.0517301119 -0.0631972106 -0.0027470171 0.0322645656 0.0385677036 0.0041983633 0.0069021498 -0.0216236011 -0.0121823056 0.0391074115 0.0190126698 -0.0176540175 0.0188246535 -0.0658391841 -0.0162795762 0.0583054788 0.0662305852 -0.0260232104 0.0216839154 -0.0871590206 -0.0009405531 -0.0074788530 -0.0950232507 -0.0120030708 -0.0038070418 -0.1232172835 -0.0007482602 -0.0210793370 -0.1294455512 -0.0161639753 -0.0164314419 -0.1878055872 0.0111952168 -0.0134861813 -0.0202529088 -0.0461594467 0.0163485169 0.0134946348 0.0496091734 -0.0339329362 -0.0418314940 0.0212857747 -0.0227424748 -0.0244865451 0.1021553729 -0.0572868417 -0.0703179865 0.0525477291 -0.0386676162 -0.0430089170 -0.0812552755 0.0305434109 0.0351776761 -0.0497297914 0.0117559290 0.0181583884 -0.1321661989 0.0560599529 0.0644014447 -0.0766783997 0.0227286567 0.0348889610 0.1192130394 0.0184521013 -0.0515669656 0.1692701794 0.0131036041 -0.0497800029 0.0958904906 -0.0205780776 -0.0769910745 0.1221555078 0.0287003845 -0.0446269836 0.1037145890 0.1158041394 -0.0303120740 0.1186270847 0.1228930167 -0.0383578768 0.0793773601 0.1385523777 -0.0263748762 0.1315591333 0.1221874093 -0.0448814186 -0.0065216620 0.0148542256 0.0456802169 -0.0148145865 -0.0059697479 -0.0140877338 -0.0105629306 0.0025723188 0.0084729850 0.0028215024 0.0172538712 0.0428050698 0.0008497111 0.0172315373 0.0531319345 0.0311931826 -0.0025656300 -0.0266918131 0.0084009705 -0.0010245533 0.0137907261 0.0416080919 -0.0561231598 -0.0711076703 0.0457684546 -0.0311577733 -0.0683556251 0.0511885762 -0.0766299202 -0.1009006635 0.0315412795 0.0312534803 -0.0197277570 0.0048450958 0.0032418991 0.0485953717 0.0210413378 0.0143513187 0.0213333075 0.0390182165 -0.0276567746 0.0141554388 0.0006553554 0.0452574037 0.0344921400 -0.0769770786 0.0375787034 -0.0361885487 0.0403167529 -0.0295857847 0.1464261227 0.0156220307 -0.0135768059 0.1030602457 -0.0465945558 0.0232079766 -0.0049092027 0.0278487623 -0.0198202588 0.1156232760 -0.0280546198 0.0112214036 0.0314430255 -0.0615770049 0.0321555585 -0.0243709026 -0.0045338708 0.0003897868 0.0596921904 0.0615278586 -0.0413499237 0.1706316117 -0.0368586964 0.0159351694 0.0174000278 -0.1000369125 0.0563253222 -0.0813708013 -0.0654622873 0.0309191225 -0.0291075105 -0.0340746498 0.0087204654 0.0083034392 -0.0240480583 -0.0017672159 0.0312336293 -0.0444555287 0.0028887953 0.0127877342 -0.0874411320 0.0005701687 -0.0431506474 -0.0536036534 -0.0053603991 -0.0096788312 -0.0488787623 0.0069361277 0.0225081103 -0.0722934597 0.0066329757 -0.0093169179 -0.0753324089 -0.0058943147 -0.0370696163 -0.0448935703 -0.0107437223 -0.0101085431 -0.0314830365 0.0088108586 0.0587848385 -0.0756809408 0.0094546951 -0.0062556105 -0.0836718695 -0.0109544924 -0.0574152602 -0.1064633302 0.0003189991 -0.0696710309 -0.0021908290 -0.0028539099 0.0715652960 -0.0022806058 0.0076228551 0.0599483224 0.0379106536 -0.0217807996 -0.0657413758 0.0673890576 -0.0068830760 -0.0442605294 0.0594100950 -0.0007964038 -0.0535956563 0.0461769714 0.0203700189 -0.0893178317 0.0491274343 0.0102980248 0.0094580690 0.0396651975 -0.0047393987 -0.0180963392 0.0639060771 0.0830924028 0.0465128507 0.0148574114 -0.0663180353 0.0837860067 0.0660796988 -0.0132399185 -0.0368720740 0.0537436588 0.0009793411 -0.0622080200 0.0518027373 0.0179389801 -0.0312234002 0.0346527514 -0.0137206574 0.0098228358 0.0252807478 -0.0251613035 -0.0398026637 0.0671027615 0.0896822242 0.0869389018 0.0639740357 0.0783987264 0.0454871959 0.0400930798 0.1198608911 0.0207429145 0.0233104543 -0.0506981900 0.1139199152 0.0150846343 -0.0745987358 0.1436691369 -0.0133646822 -0.1288120043 0.0497623200 0.0174839525 -0.0095035520 -0.0846926041 0.0627836206 -0.0141844928 -0.0388191410 0.0722241404 0.0374982645 -0.0797450561 -0.0062001043 0.0168567868 0.0357719725 0.0148653373 0.0267115694 0.0115895763 0.0168519468 0.0323173150 -0.0169597431 -0.0042704624 0.0272369794 -0.0194072210 -0.0238559456 0.0188704820 0.0049179045 -0.0247473213 0.0147199884 0.0322951255 0.0278345375 0.0293737796 0.0134066240 0.0326517953 0.0399410210 -0.0377381966 -0.0090548845 0.0246736563 -0.0485788709 -0.0389471581 0.0149176206 0.0031994204 -0.0411283157 0.0110111875 0.0500147029 0.0772375392 -0.0479546420 -0.0281957342 0.0617648360 -0.0407814471 0.0075797638 0.0068150936 -0.0134742486 0.0035289938 -0.0341322840 0.0132683699 -0.0364294317 -0.0191648360 0.0129412633 -0.0725599595 0.1200049726 -0.0705413159 -0.0232754667 0.0899331645 -0.0543812989 0.0377849713 -0.0121824531 -0.0096192106 0.0492834369 -0.0768582281 0.0339857764 -0.0390911317 -0.0529660116 0.0351005541 -0.1035793271 -0.0422821467 -0.0321891213 -0.0187436290 0.0211042922 0.0775837521 -0.0994117325 -0.0578624558 -0.0005958807 0.0427655651 0.0190905299 -0.0170219424 0.0939868473 -0.0115781046 -0.0034319415 -0.0135822476 -0.0023110813 0.0103675561 0.0214444365 -0.0245925697 -0.0294873998 -0.0866628718 -0.0285594282 -0.0401280019 -0.1188306891 -0.0324528281 -0.0433714750 -0.1217405660 -0.0398413003 -0.0630872152 -0.1820802763 -0.0042432498 0.0063182041 0.0086382107 -0.0175711635 -0.0192678362 -0.0637519643 0.0034219328 0.0202324068 0.0467847096 -0.0200685278 -0.0246719819 -0.0802391971 -0.0133386448 -0.0204518929 0.0201344248 0.0027700737 -0.0463278173 -0.0208077371 -0.0636305973 -0.0098314721 0.0718527636 -0.1139812044 -0.0133791825 0.0973382593 -0.0690039169 0.0024132903 0.0930024322 -0.1596489517 -0.0019900484 0.1438308555 -0.0406620973 -0.0537286523 0.0007212592 -0.1042781660 -0.0332721719 0.0631622468 -0.0297616070 -0.0719843365 -0.0299006954 -0.1442953118 -0.0340286733 0.0841850919 0.1019269384 -0.0401149005 -0.0174241260 0.0947219875 -0.0330386095 -0.0222954486 0.0918261233 -0.0702251002 0.0205309184 0.1525037933 -0.0442793154 -0.0298762553 0.0700890449 0.0306910384 -0.0810987058 0.0935552968 0.0292896625 -0.0980300090 0.0447571897 0.0556787808 -0.0760525843 0.0788355139 0.0372443731 -0.0912015816 -0.0074637725 0.0073688601 -0.0438162653 -0.0029801637 -0.0409170888 -0.1413264800 -0.0073189842 -0.0189794596 -0.0857699996 -0.0184878155 0.0379660271 0.0515077699 -0.0133651337 0.0317282010 0.0156166300 -0.0056402549 0.0324840746 0.0170949032 -0.0259529594 0.0367994643 0.0476167572 0.0595158693 -0.0418108860 -0.0530215848 0.0302802929 -0.0038046403 -0.0279660309 0.0974381445 -0.0760311984 -0.0940676276 -0.0069644125 0.0492193641 0.0229017784 -0.0181255901 0.0431633644 0.0187345786 -0.0150502102 0.0379050590 0.0226811688 -0.0101007144 0.0332946025 0.0254596302 -0.0145529789 0.0232702455 0.0183544293 0.0407880440 0.0088226060 -0.0395803950 -0.1023258894 -0.0465315566 -0.0422873146 -0.0708167323 -0.0346144906 -0.0317260906 0.0052614395 -0.0017172200 -0.0116685833 -0.0557084718 -0.0386217930 -0.0700070168 -0.0462270741 -0.0156981678 0.0219444734 -0.0083745402 0.0014650226 0.0302722584 -0.0154757013 -0.0227644210 -0.0574753260 -0.0748051544 -0.0534480037 -0.1138472903 -0.0573257669 -0.0125200570 0.0539304950 0.0088606904 0.0181837879 0.0669455634 0.0349621887 0.0153059395 -0.0169291736 0.0352599573 0.0336879397 -0.0159738708 0.0232023740 0.0442985299 -0.0186187166 0.0451010323 0.0384140257 -0.0174130252 0.0596923011 0.0452969090 -0.0157863072 0.0264437627 0.0528529594 -0.0609219124 0.0687820642 0.0280688387 0.0223321021 0.0775410475 0.0310580375 0.0268304040 0.0328741075 0.0564260586 -0.0623601049 0.0061621812 0.0614159178 -0.0946029785 0.0801930471 0.0153432014 0.0488238510 0.0941948545 0.0249129339 0.0598593941 0.0176822339 0.0676364189 -0.0987021836 0.0667336412 0.0483205287 -0.0143984901 -0.0008614020 -0.0257296337 -0.0910208816 0.0023112871 -0.0310688811 -0.0520832644 0.0302029100 0.0004509049 -0.0335085296 0.0127931674 0.0108211330 -0.0180687706 0.0013453873 0.0013337436 -0.0042088587 0.0135542591 -0.0240258086 0.0635221944 0.0039309541 0.0066303476 -0.0013876962 0.0339551864 0.0411708764 0.0332551460 -0.0240213215 -0.0375815425 -0.0266410593 0.0042103636 0.0690716296 -0.0612198602 -0.0223607001 0.0117387837 -0.0475464516 -0.0361845063 0.0065998830 -0.0405085980 0.0144304427 -0.0015304765 0.0590609236 0.0393834514 0.0691867739 -0.0207781267 0.0681371105 0.0782065701 0.0766862460 -0.0211900875 -0.0370540613 -0.0314344759 -0.0244877777 -0.0423459328 -0.0435559383 -0.0343800751 -0.0513437081 -0.0110974683 -0.0151077860 0.0438430970 -0.0885583205 -0.0042623101 0.0924186982 -0.1063670222 0.0310642515 0.1167792682 -0.0341045191 0.0129659443 0.0091305232 -0.0250660790 -0.0566934220 0.0217836958 -0.0919272493 -0.0766620431 -0.0141010474 -0.0031625037 -0.0070622613 0.0086124067 -0.0414606820 -0.0183195222 0.0097594477 -0.0303529521 -0.0290943800 -0.0153954953 0.0083340846 -0.0226770347 -0.0332362067 0.0277418162 -0.0083394198 -0.0234290487 0.0083656009 -0.0016567403 -0.0058290594 -0.0239548807 -0.0206650153 0.0223803705 -0.0447506725 -0.0400672247 -0.0247733435 0.0248865118 -0.0275712584 -0.0682321455 0.0760049799 -0.0037981045 -0.0352245090 0.0216677622 0.0087001178 -0.0069431589 -0.0338064440 0.0846990772 -0.0836046890 0.0030106332 0.0785825879 -0.0836203583 0.0208517686 0.0201386202 -0.0031975662 0.0004490693 -0.0381608278 0.0893204012 -0.0424997640 -0.0335178698 0.0921765559 -0.0597564760 0.1315375447 -0.1510989392 0.0238522193 0.1180294849 -0.1451331861 0.0514500763 0.0199558964 -0.0223145901 0.0295188263 -0.0865907207 0.1554048763 -0.0599077832 -0.0809302337 0.1648244451 -0.0900309105 0.0086653637 0.0172664288 0.0275018701 -0.0681331557 -0.1808665755 0.1628131475 -0.0109398739 0.0252698042 0.0020223037 0.0523087752 -0.0887108596 0.0833339932 -0.0107912471 -0.0175886086 -0.0460444508 -0.0131811156 0.0174030027 0.0395415863 -0.0118284599 -0.0488987811 -0.0893575912 -0.0118999510 -0.0419294886 -0.0386687040 -0.0123752909 -0.0783059237 -0.1622703079 -0.0126859948 -0.0662087555 -0.0722387925 -0.0119579297 0.0242960825 0.0942179593 -0.0115841153 -0.0036483572 0.0592840445 -0.0081264690 0.0478644195 0.1558203109 -0.0117828064 0.0004084096 0.1035286976 -0.0243396096 0.0109742845 0.0409629665 0.0318381403 -0.0333738124 -0.0185688161 -0.0704355962 0.0215753901 0.0872957553 -0.0577040919 -0.0084860035 0.0740533936 -0.1172543796 0.0520994114 0.1311808439 -0.0965294675 0.0010007215 0.1138792433 0.0536527798 -0.0681581458 -0.0378378124 0.0091837596 -0.0548441907 0.0076197255 0.1029871000 -0.1041005652 -0.0875286821 0.0242495507 -0.0799774415 -0.0060149619 -0.0065122564 0.0254586690 -0.0547418658 0.0143429652 0.0228726022 -0.0535768671 -0.0047038068 0.0386667953 -0.0901261383 -0.0461050379 0.0266569552 -0.0465973889 0.0191935412 -0.0034613383 0.0146694426 0.0073977230 0.0119978672 0.0295788196 0.0298480474 -0.0180018441 0.0073697804 0.0264090343 -0.0177644755 0.0317472172 0.0079715940 -0.0143873081 -0.0547075618 0.0123693772 -0.0292585801 -0.0807904815 0.0095016958 -0.0210919343 -0.0602754946 0.0033351933 0.0043910313 0.0036163997 0.0051256795 -0.0013528653 -0.0248736157 -0.0091411275 0.0170168422 0.0220607668 -0.0050931168 0.0143660488 0.0200839378 -0.0310525631 0.0264678189 0.0325219328 -0.0281798017 0.0274303810 0.0310529423 -0.0381150755 0.0304988860 0.0363195865 0.0132255516 0.0056228946 0.0071946873 -0.0007408544 0.0088741988 -0.0296604989 0.0096285911 0.0023683810 -0.0277468329 0.0001520070 0.0076846575 -0.0362101405 0.0250752502 -0.0161721693 -0.0360306020 0.0114734048 0.0395582167 0.0173400967 -0.0806911530 -0.0291386013 0.0541300016 -0.0597040502 -0.0127115855 0.0492167784 -0.0042960611 0.0276432060 0.0375433150 -0.0340309794 -0.0233562686 0.0293040489 -0.0593256869 0.0179440676 0.0623957742 -0.0312494126 0.0390329832 0.0558348727 -0.0068079276 -0.0015464099 0.0223114927 -0.0347319131 -0.0479985844 0.0167226094 -0.0802115121 0.0266433492 0.0761714373 -0.0344948276 0.0657687067 0.0605255249 0.0161442730 0.0389611675 0.0332813475 0.0273497309 0.0329097428 0.0462654848 0.0368050191 0.0254438840 0.0526187623 -0.0067015524 0.0277592822 0.0213470941 -0.1324850331 0.0223895233 -0.1370415752 -0.0122038014 -0.0016200632 0.0086615866 -0.0622502476 0.0528649482 -0.0403588015 -0.1243912081 0.0505275126 -0.1190535579 -0.0746447883 -0.0044545743 -0.0698494041 0.0296798650 -0.0217147967 0.0527376497 -0.0620691128 0.0744422212 -0.0382766551 -0.1628044358 0.0668328186 -0.1675111937 -0.0799904166 -0.0274220981 -0.0834273502 -0.1840117415 0.0200533906 -0.2040596413 0.0133332579 -0.0074459887 -0.0014961673 0.0112808093 -0.0179080531 -0.0225325055 -0.0242286017 0.0280748914 0.0217685220 0.0586267816 -0.0103698190 0.0102955332 0.0048934520 -0.0481205710 0.0620194204 -0.0034083398 -0.0571652325 0.1981356916 0.0010689898 -0.0458795617 0.0431652892 0.0712510253 -0.0110078063 -0.0221266272 -0.0902111217 -0.0521332348 0.0204679487 0.0843390414 -0.0420626949 0.0379093229 -0.0432938838 -0.0934319834 0.0045279933 -0.1265717086 -0.1134791595 0.0294723258 0.0690309773 0.0060650025 -0.0339441062 0.0634485470 0.0323413709 -0.0545124887 0.1330645343 -0.0375538664 -0.0127550104 -0.1071934213 -0.0625470285 0.0276886573 -0.0976961461 -0.0309391011 -0.0102779731 -0.0887441127 -0.0633408007 0.0298061732 0.0605475098 -0.0496316268 0.0968180145 0.0849448485 -0.0332566814 -0.0390390232 0.1646632055 -0.0456757936 0.0540830820 -0.1325522910 -0.0911590321 0.0550405532 -0.1481449701 -0.1651603062 -0.0178687723 -0.1648069584 -0.0988761819 0.0636710401 0.0074906863 -0.0126766598 -0.0477004974 -0.0088569538 -0.0022609104 -0.0359648888 -0.0021718913 0.0150187291 -0.0213680290 0.0187789324 0.0167758592 -0.0157823568 0.0314444759 -0.0042799842 -0.0186972173 0.0248366980 -0.0180538539 -0.0358519578 -0.0246200281 -0.0019273732 -0.0419413970 -0.0115748204 0.0324322669 -0.0195290230 0.0319751123 0.0636181663 -0.0214857300 0.0487037823 -0.0027783854 -0.0136124006 0.0362802091 -0.0298976093 -0.0423849686 -0.0163530871 -0.0125119554 0.0180288809 -0.0064248082 -0.0216043383 0.0036645806 -0.0047058205 0.0125931518 -0.0071675095 -0.0120264059 0.0550718834 -0.0047554723 -0.0220338584 0.0605167537 0.0101709348 -0.0189448782 -0.0400334675 0.0281277235 -0.0008288890 -0.0538162079 0.0014721190 0.0070507944 0.0019091941 -0.0224398632 -0.0095039429 0.0811437873 -0.0137497879 -0.0278886144 0.0916251041 0.0135685781 0.0449607956 0.0545323117 -0.0123404849 0.0293374809 0.1138907466 -0.0417546523 0.0122234817 0.0429589925 -0.0453581859 0.0102833128 -0.0468316196 -0.0116329050 0.0099270959 -0.0144998552 -0.0257728092 0.0073619630 -0.0013258126 0.0064793101 0.0152208551 -0.0161805949 -0.0125127531 0.0192631827 -0.0034298163 0.0344256669 0.0166946847 -0.0259277379 -0.0365457731 0.0237563070 -0.0027966134 0.0486621411 0.0109121702 0.0071497894 0.0434437180 0.0169721926 0.0073062760 0.0617114240 0.0109337387 0.0131226796 0.0585056363 0.0196010605 0.0146061076 0.0956656841 0.0005941299 0.0085929154 0.0168199734 -0.0088399807 0.0111942381 0.0188373647 0.0319477965 -0.0107400064 0.0036813801 0.0655336190 -0.0341422172 -0.0188842299 0.0364878473 -0.0095281927 0.0080154830 0.0957866055 -0.0514169564 -0.0337896338 0.0193947681 -0.0101670295 -0.0008508744 0.0609320504 -0.0352904054 -0.0226394336 0.0130858195 -0.0093893907 -0.0017705682 0.0885576466 -0.0547431213 -0.0416546303 0.0839203872 -0.0526263991 -0.0557956637 0.1242062284 -0.0201124073 -0.0826287128 0.0647100707 -0.0918617075 -0.0542940397 0.0893003545 -0.0830662794 -0.0789231991 0.0795259356 0.0350186543 0.0192925463 0.0897154676 0.0557471339 0.0198081723 0.0571683219 0.0473081785 0.0109148295 0.1090493923 0.0297237703 0.0199110863 -0.0153321572 -0.0145165180 -0.0734062989 -0.0336990049 -0.0587328273 -0.2024902197 -0.0238634537 -0.0312261983 -0.1305351101 0.0041914137 0.0344549032 0.0439209756 0.0003116367 0.0172797917 0.0051792433 0.0075955268 0.0314632579 0.0031604523 -0.0030051160 0.0272902731 0.0375081289 -0.0080198308 -0.0221871628 -0.0356523170 -0.0033980508 0.0178767455 -0.0274584647 -0.0170340916 -0.0360416277 -0.0618368967 0.0226890580 0.0418911713 -0.0023946877 0.0006385384 0.0201097635 0.0150349057 0.0138185361 0.0277178423 -0.0027156809 0.0097481487 0.0119163280 -0.0191645652 0.0205485406 0.0357040630 -0.0017478849 -0.0207798873 -0.0343473740 -0.0404545547 0.1307976283 -0.0659220134 0.1188638702 0.0980128435 -0.0597602140 0.0824049803 0.0135455726 -0.0459895887 -0.0066098512 0.0904294087 -0.0571976888 0.0955677718 0.0625718843 -0.0536803174 0.0180286579 0.0226378286 -0.0487551719 -0.0208027098 0.0425718403 -0.0479047183 0.0418339871 0.1159304363 -0.0603376760 0.1432763188 0.0662960267 -0.0544116777 0.0032638191 -0.0020652161 -0.0469206451 -0.0629149636 -0.0176582471 -0.0364535345 -0.0359004030 -0.0163562035 -0.0272172744 -0.0356395036 -0.0111128889 -0.0336944287 -0.0163106928 -0.0059717495 -0.0266012569 -0.0290545847 0.0421452410 -0.0319040000 0.0502581881 0.0030881594 -0.0225524581 -0.0078290005 0.0069927707 -0.0326450865 -0.0160220058 0.0309356631 -0.0353630619 0.0242744147 0.0270412428 -0.0249438765 0.0315536788 -0.0071088677 -0.0175212744 -0.0182942774 0.0002937075 -0.0350856980 -0.0309446669 0.0395646917 -0.0386573510 0.0369359407 0.0348652592 -0.0215040444 0.0505795679 0.0621811809 -0.0338646332 0.0845937637 0.0172097731 -0.0394941739 0.0344321824 0.0169448416 -0.0114774204 0.0202354738 -0.0188960544 0.0433932493 -0.0370543933 -0.0202262786 0.0325112106 0.0064137291 -0.0178960412 0.0222855883 0.0207140999 -0.0116509374 0.0120376506 0.0491914024 0.0006232062 -0.0193408819 0.0073504188 -0.0084172402 -0.0364720789 -0.0239270414 -0.0230432456 -0.0105657788 0.0063102029 0.0628083338 -0.0344423663 0.0213631198 -0.0219622521 0.0201556134 0.0145160190 -0.0176307619 0.0033234295 0.0428969067 -0.0061472985 -0.0142488959 -0.0382368611 -0.0088756013 -0.0469726589 -0.0084982485 -0.0144797336 -0.0549293773 -0.0404603043 -0.0206351961 -0.0073197879 0.0210288251 -0.0233072744 -0.0141669005 -0.0088292304 -0.0389356796 -0.0035506082 0.0045884904 0.0746215799 -0.0146560665 0.0550077460 0.0761074635 -0.0584893945 -0.0013368230 0.0824576284 -0.0435562139 0.0216699029 -0.0121604989 0.0172505829 0.0621595239 -0.0186465966 -0.0013409132 0.0409680428 -0.0194165621 -0.0187409190 0.0449079456 -0.0178256998 -0.0144176163 -0.0675787896 -0.0329970739 0.0100076912 -0.0618321090 -0.0303518190 0.0188985774 -0.0320607804 -0.0101206543 0.0048722359 -0.0117780127 0.0069062713 -0.0170448232 -0.0187450292 0.0008988102 -0.0278001746 -0.0462143038 -0.0467215535 0.0222182779 -0.0794872470 -0.0425141843 0.0381509477 -0.0280410918 -0.0031765122 0.0198417571 0.0164151185 0.0244475942 -0.0256300439 -0.0036767964 0.0141047855 -0.0460711197 -0.0519166346 -0.0638924401 0.1442001769 -0.0579810082 -0.0687341300 0.1522604349 -0.0539414943 -0.0272065652 0.0561643105 -0.0266627023 0.0148415489 -0.0407512141 -0.0035145810 0.0182049401 -0.0398463253 -0.0107403866 -0.0882617858 0.2135172665 -0.0811902394 -0.0981246671 0.2209609812 -0.0704984748 -0.0249202606 0.0476334986 -0.0166841316 0.0471253809 -0.1182638615 0.0194021160 0.0547881252 -0.1163237774 0.0059869426 0.0283119764 0.0441929274 0.0087388320 -0.0287250842 0.0084860172 0.0453678009 0.0133377049 -0.0817749378 0.0568106185 -0.0624864717 0.1713145580 -0.0851291909 -0.0166161141 -0.0083687548 -0.0740671244 0.0031552742 0.0332026973 0.0325735280 -0.0265383820 -0.0169940642 -0.1153970522 -0.0090737661 0.0214415826 -0.0364195538 -0.0483360606 -0.0526022554 -0.2054953276 -0.0157968164 0.0151954199 -0.0644822491 0.0228138843 0.0708972492 0.1096945644 0.0160253740 0.0671593288 0.0839856437 0.0478051530 0.0987425293 0.1851084612 0.0298624880 0.0946068159 0.1515244200 -0.0132212550 -0.0128058267 0.0367033174 -0.0055215496 -0.0414029974 -0.0096421338 -0.0207751308 -0.0341958642 0.0795554284 -0.0153210886 -0.0836878266 0.0660701918 -0.0269338880 -0.0126454987 0.1197162524 -0.0197637174 -0.0989798315 0.0973995053 0.0014844103 -0.0938534597 -0.0252374774 -0.0006119032 -0.1148612975 0.0114493325 0.0081917816 -0.1176972446 -0.0681374696 0.0072514789 -0.1541687272 -0.0015793479 -0.0194883162 0.0304109147 0.0059946740 -0.0058568417 0.0185489597 0.0142481468 -0.0227751346 0.0296298377 -0.0136992489 -0.0311864407 0.0433315883 0.0176367187 -0.0203500451 0.0361319660 0.0055011445 -0.0217407133 0.0297445096 0.0033409605 -0.0208846448 0.0385933822 0.0084328345 -0.0210970272 0.0433752614 -0.0033643336 -0.0233300177 -0.0365663531 -0.0291961279 -0.0746223531 -0.0157540270 -0.0743132504 -0.0431644783 -0.0089627006 -0.0522640734 0.0406962519 -0.0030522239 -0.0010356579 0.0204963714 -0.0268964326 -0.0019082602 0.0286060718 0.0033242547 0.0016659904 0.0496432267 -0.0124390132 0.0005438587 -0.1188834738 0.0485567550 0.0572762783 -0.0636652899 0.0412235134 0.0245573163 -0.1835992136 0.0806841184 0.0842115867 0.0637588156 0.0034060764 -0.0186284862 0.0304306892 -0.0417032540 0.0121167979 0.0391121662 -0.0366492070 0.0018805507 0.0594171072 -0.0649885799 0.0084705130 0.0206900342 -0.0297738005 0.0071807470 0.0093738538 0.0075716667 0.0315946185 0.0185752595 0.0211366064 0.0121098392 0.0192817897 0.0177261095 0.0172872652 0.0171034170 0.0082435973 0.0258985685 0.0239521689 0.0142389966 0.0322626315 0.0159475355 0.0149442849 0.0100720497 0.0142239905 0.0105784771 0.0140943088 0.0227620094 0.0093297340 0.0379098852 0.0278418841 0.0151511054 0.0403137371 0.0128890073 0.0170511067 -0.0025934689 0.0095521963 0.0100892488 0.0058371537 0.0126836686 0.0049330924 0.0261652295 0.0075561677 -0.0013763703 0.0202971779 0.0039968721 0.0024877269 0.0091041670 0.0109088894 -0.0006746926 0.0225769633 0.0194585862 0.0078755421 0.0087618358 -0.0154905492 0.0152064501 -0.0403846628 0.0447665526 -0.0134205792 0.0848286758 0.0496658897 -0.0089856642 0.0784809513 -0.0122745990 0.0203976053 -0.0495834481 -0.0391071371 0.0244198871 -0.0847871678 0.0709354416 -0.0296032245 0.1412220245 0.0741146993 -0.0169416026 0.1245437471 -0.0343724139 0.0345029995 -0.1026437071 0.0221198661 0.0116909298 0.0014466124 0.0273539009 0.0062622549 0.0546726948 0.0271299250 -0.0011966266 0.0390651347 -0.0724954603 0.0606221676 0.0070240040 0.0131327372 -0.0246683102 0.0030458677 0.0082453847 -0.0028497051 -0.0281754970 -0.0053973857 0.0225086892 -0.0856065555 -0.0073192449 0.0212671347 -0.0181118914 -0.0317343591 0.0162391004 0.0314420194 0.0685160581 -0.0090483749 -0.0182769940 -0.0678245442 0.0504917845 -0.0463395010 0.0157278346 -0.0008376077 -0.0172047033 0.0113108590 0.0166352986 -0.0469585185 0.0032126556 0.0213991010 0.0335167339 -0.0432601325 0.0065823294 0.0794273533 -0.0722084417 0.0092841934 0.0070470801 0.0996187239 0.0092356880 -0.0488582903 0.0801299760 -0.0409924902 0.0105620709 0.0710776252 -0.0097531134 -0.0185705283 -0.0618818362 0.0414411507 -0.1038933516 -0.0735439448 0.0574993541 -0.0123846966 -0.1136155949 0.0764800716 -0.0449575594 0.0016225099 0.0018965499 -0.0675093847 0.0140071960 0.0192148126 -0.0407893748 0.0162265663 0.0408175451 -0.0517273521 -0.0342867684 -0.0524121817 -0.0224056563 -0.0549746488 -0.0598594560 0.0003808880 -0.0474931350 -0.0405769155 0.0077528292 -0.0190680893 -0.0144254392 -0.0081297399 0.0015100807 -0.0095466309 -0.0317700355 -0.0074485034 -0.0280062309 -0.0397217721 -0.0737203750 -0.0741112663 0.0104603903 -0.0625724648 -0.0437590941 0.0253168925 -0.0097320504 0.0119505093 0.0072147159 0.0251049985 0.0113826219 -0.0436932337 0.0095112370 -0.0195819817 -0.0599027926 -0.0482684572 -0.0147417818 0.0124727682 -0.0310975967 -0.0406700026 0.0059284310 -0.0434280449 0.0115352984 -0.0097442721 -0.0724310732 0.0986708463 -0.0204847351 -0.0885455401 0.1184917436 -0.0121591876 -0.0445074459 -0.0593984403 0.0281946503 -0.0088197094 -0.1038859967 0.0152169344 -0.0162421158 -0.0373840821 -0.0119674714 -0.0787411553 0.1402320298 -0.0336829233 -0.1112299539 0.1756334384 -0.0192083915 0.0135401983 0.0074998612 0.0181223213 -0.0251840007 0.0364941261 0.0119468798 -0.0095689780 0.0235177049 -0.0461152020 -0.0021437782 -0.1394152093 0.0212024355 -0.0221833482 0.0304383093 -0.0382840659 0.0238810104 0.0370235124 -0.0116525457 -0.0448397667 0.0744195765 -0.0501939094 -0.0136848213 0.1260411791 -0.0326414719 -0.0890465457 0.0678322150 -0.0702894399 -0.0297179620 0.1587321351 -0.0383574644 0.0570755054 0.0900130294 -0.0004255731 0.0368392549 0.1338736919 -0.0058573011 0.0995035602 0.0949117655 0.0182432267 0.0613547477 0.1722411653 0.0095349092 0.0317876910 -0.0325506824 0.0095596139 -0.0697526448 0.0037905557 0.0428993077 0.1160145269 -0.0954487926 -0.0097959390 0.0948018663 -0.1229379905 -0.0041689083 0.2059620873 -0.1212734031 -0.0302319901 0.1682504739 -0.1720075494 -0.0286450545 -0.1079774608 -0.0175265186 0.0585910873 -0.0243343823 -0.0815914584 0.0357725245 -0.1987243983 0.0136904787 0.0835166906 -0.0479268136 -0.0995858588 0.0441686168 0.0157958571 -0.0234846198 0.0178517226 0.0166668630 -0.0351533787 0.0267542826 0.0156094617 -0.0217071313 0.0109236309 0.0165822084 -0.0107413873 0.0269243209 0.0133170775 -0.0252891400 0.0033398216 0.0130820670 -0.0205282468 0.0051662164 0.0130894148 -0.0255453735 0.0025412948 0.0147505607 -0.0291022997 0.0081379048 0.0038409378 0.0225648884 0.0383026283 0.0057077985 0.0285910289 0.0555634956 0.0054780468 0.0265515300 0.0505184578 0.0045004173 0.0191237602 0.0341694026 0.0016970731 0.0123384954 0.0198139656 0.0257438491 0.0078842226 0.0012582571 0.0112254960 0.0101654171 0.0229981983 -0.0042163022 -0.0053500951 -0.0056259173 0.0107985238 0.0051201244 -0.0114157868 -0.0144183700 -0.0076974167 -0.0135226870 0.0531793292 0.0075344222 -0.0133670899 -0.0023205962 -0.0051994119 -0.0226976296 0.0381146786 -0.0145292811 -0.0434984188 0.0206127459 -0.0245249656 -0.0720801465 0.0656141047 -0.0278846909 -0.0533031007 0.0737478584 -0.0098633014 0.0495219822 -0.0154936624 -0.0297164499 0.0115198731 -0.0007690684 -0.0217175969 0.0130129735 0.0355043436 0.0006326318 0.0167114110 0.0156045981 -0.0290699496 0.0058642477 0.0010194208 -0.0037922584 0.0233009554 0.0206666661 0.0068728106 0.0247681718 0.0339105801 -0.0179179834 0.0063242770 0.0143444428 -0.0422140766 -0.0026834265 -0.0129548896 0.0021507142 0.0300584116 0.0225892132 0.0194956616 0.0332437043 0.0477744930 0.0054780873 0.0188534505 0.0205294382 0.0174471107 -0.0100688131 0.0112894770 0.0284131122 -0.0409399778 0.0118720924 0.0211012632 -0.0252552455 0.0025076314 0.0085958437 0.0041919309 0.0649165217 -0.0055067067 0.1016106180 -0.0548936384 0.0457813921 -0.1533244079 -0.0603702810 0.0389734810 -0.1396550461 0.0627450481 -0.0145420722 0.1217585530 0.1101919640 -0.0225715921 0.1932876185 -0.1098299390 0.0759543342 -0.2716714607 -0.1085742111 0.0539533270 -0.2319866634 0.1081204432 -0.0403449893 0.2307164456 0.0013283642 0.0021792842 0.0211728687 0.0507578966 -0.0225765662 -0.0071704484 0.0475136610 -0.0331141549 -0.0345784733 0.0049638834 0.0186396259 -0.0197753200 -0.0582834991 0.0089350179 -0.0083042297 -0.0374064984 0.0021247914 0.0035889917 -0.0273973116 -0.0113874867 -0.0129754624 -0.0395534766 0.0217665072 -0.0083169420 -0.0042167141 0.0334692222 -0.0727895208 -0.0564918168 0.0491225495 0.0036899492 -0.0697548976 -0.0172632587 0.0282148612 -0.0194249906 0.0080889667 0.0282312010 0.0208988436 -0.0056512652 0.0572969531 -0.0282190113 0.0489919521 -0.0892205432 0.0028207820 0.0455723049 -0.1101055219 0.0434067357 0.0138334891 -0.0649901625 -0.1253185247 -0.0008051590 -0.0175362464 -0.0745951446 0.1304024181 0.0403602826 0.0280041848 0.0280860380 -0.0022061102 -0.0811573889 -0.0239812303 0.0441963386 -0.0794048189 -0.0018996587 0.0565004193 -0.0743039318 -0.0532094591 0.0112300355 0.0320256177 0.0057052124 0.0742654214 0.0282761129 0.0097439719 0.0736592824 0.0338208421 -0.0439591953 0.0461359124 0.0058118962 0.0214377197 0.0170079001 -0.0242386030 -0.0686334798 0.0804645236 -0.0284926033 -0.0818105586 0.0748477703 -0.0053437848 -0.0035065109 0.0064865412 0.0267433303 0.0976162252 -0.0748692672 0.0349761492 0.1134017460 -0.0730064353 -0.0428972445 -0.1304639636 0.1430588689 -0.0488475832 -0.1562495534 0.1320370386 -0.0106523141 -0.0359829671 0.0333069246 0.0483209122 0.1620396373 -0.1304875985 0.0603638143 0.1951282093 -0.1310740127 0.0149306434 0.0082435905 -0.0115633150 0.0126938557 0.0091871915 -0.0047368603 -0.0004404682 0.0209730810 -0.0073354799 -0.0150895662 0.0406841535 -0.0189654563 -0.0119951317 0.0396013816 -0.0254498069 0.0264851874 -0.0037133003 -0.0081691564 0.0228138944 -0.0040847094 0.0036593266 0.0049611155 0.0012212458 0.0081626809 -0.0266405925 0.0518255836 -0.0214823203 -0.0220862431 0.0513113882 -0.0328879426 -0.0187907903 -0.0857437294 0.0646672083 -0.0093571787 -0.0160878350 0.0217574008 -0.0028244594 0.0142236319 0.0007190013 0.0172062890 -0.0309044816 0.0296684562 0.0026352144 0.0179775270 0.0260036923 0.0027929292 0.0184958895 0.0269641420 -0.0060724077 -0.0029484930 -0.0272128905 -0.0158309738 -0.0260227240 -0.0848171013 -0.0069166277 -0.0049520700 -0.0322531946 -0.0243377756 -0.0468161631 -0.1369775417 -0.0049714867 0.0030083401 -0.0108476921 -0.0152587292 -0.0213186747 -0.0729701917 -0.0056832466 0.0059291977 -0.0026733977 -0.0234104008 -0.0376149087 -0.1137079216 0.0041459811 -0.0063337911 0.0249286277 -0.0057834536 -0.0135835704 0.0100150771 0.0112644466 -0.0226755980 0.0397028630 0.0007366684 -0.0415770780 0.0415454566 0.0271204118 -0.0205599080 0.0487203196 0.0067688129 -0.0533209172 0.0521550368 -0.0186864968 -0.0321368540 0.0126920927 -0.0161892414 -0.0449555709 0.0295595805 -0.0302467055 -0.0364915306 0.0000048201 -0.0255202349 -0.0582724198 0.0314961515 -0.0748039844 0.0262258892 -0.0134861521 -0.0991765401 0.0436225976 -0.0254570158 -0.0641685237 0.0408062688 0.0073791552 -0.0751091380 0.0059844089 -0.0282651265 -0.0568814319 -0.0163298934 0.0196137245 -0.0708892600 -0.0010593364 0.0353864244 -0.0452788796 -0.0322068275 0.0109567531 -0.0573715048 -0.0298161185 0.0380126297 0.0051441262 0.0350622406 0.0470331296 0.0336927295 0.0393063325 0.1065647967 0.0176905378 0.0309656330 0.0829930964 -0.0227048683 0.0155940998 0.0282531565 -0.0157055594 0.0202448957 0.0137926729 -0.0009086493 0.0077112390 0.0106027357 -0.0206406835 0.0162607602 0.0245248004 0.0137373542 -0.0020050346 0.0002213582 0.0098405543 0.0007072351 0.0027762232 0.0243975952 -0.0096377881 -0.0080414151 0.0230534407 0.0009117659 -0.0038426706 -0.0230719214 0.0082407200 -0.0349046436 0.0177013470 -0.0057482715 -0.0513599762 -0.0054331416 -0.0093693780 -0.0830618001 0.0553858663 -0.0164744562 -0.0619190857 0.0266060049 0.0108628616 0.0311805817 -0.0184730611 -0.0529657906 0.0760302333 -0.0030434615 -0.0397787638 0.0709473907 0.0339837668 -0.0059419383 0.0534337305 0.0148045759 -0.0474621644 0.0531171487 -0.0030315485 -0.0158110242 0.0805454600 0.0194973846 -0.0006224158 0.0763317407 0.0298836375 -0.0275364175 0.0388787704 0.0140282259 -0.0657695800 0.0432671173 -0.0188647439 -0.0089815565 0.0931977092 0.0223183477 0.0158865348 0.0875128853 0.0371607410 0.0051742937 0.0412164058 0.0202421959 0.0007408109 0.0201975771 0.0236293657 0.0004418630 0.0000702646 0.0111188236 -0.0116928759 0.0346317141 0.0002397702 -0.0284779990 0.0616659466 -0.0484951563 -0.0056117705 -0.1062660857 0.0662765785 -0.0280932966 0.1909073088 0.0640353761 -0.0359236604 0.2082863955 -0.0559563119 -0.0119893487 -0.0980078636 -0.0898560864 0.0065181834 -0.2273523199 0.1169281094 -0.0420244823 0.3034916172 0.1080069070 -0.0452260912 0.3243944228 -0.1045840925 -0.0035320349 -0.2154024662 -0.0043448814 -0.0341547167 0.0713571891 0.0360318263 -0.0275835754 0.0030708186 0.0322438411 -0.0267448306 -0.0367347282 0.0122126323 0.0033145321 -0.0036690369 -0.0109700075 -0.0337627552 0.0307283500 -0.0250231302 -0.0232810102 0.0132960444 -0.0207855592 -0.0278169577 0.0343025471 -0.0243307796 -0.0112725175 -0.0421320310 0.0157149021 0.0132952962 -0.0672473632 -0.0185710813 -0.0202323513 -0.0472242589 -0.0041681538 0.0193852622 -0.0730354926 -0.0439543042 -0.0129147150 -0.0218037015 -0.0734354213 -0.0036255371 -0.0418448510 0.0008885780 0.0090737816 -0.0674619029 0.0174714012 0.0411221536 -0.1089952328 0.0633634435 0.0106266319 -0.0470332140 0.0213661127 0.0066190861 -0.0489834176 -0.0060668448 -0.0553938359 -0.0323045405 -0.0240567673 -0.0071837890 -0.0563309807 -0.0257199703 -0.0011295844 -0.0740297498 -0.0117140394 0.0407287225 -0.1195550205 0.0335165456 0.0445331694 -0.0536156660 -0.0496892160 -0.0128632973 -0.0470847832 -0.0893990884 0.0001759417 -0.0810807140 -0.1041380441 0.0089508578 -0.0139245050 0.0117450979 0.0422385801 0.0172754661 0.0105407589 -0.0050221317 0.0356008645 0.0092318339 -0.0084577908 0.0085956711 0.0047046134 0.0320745503 -0.0321496912 0.0069477325 0.0833332756 -0.0589248520 0.0121103661 0.0920718868 -0.0368689268 0.0098986823 -0.0408283241 0.0746366125 0.0092549546 -0.0464957280 0.0263618793 -0.0026503460 0.0123694898 -0.0363089433 0.0061219239 0.1167331324 -0.0923250605 0.0126219058 0.1360015105 -0.0550451190 0.0145318487 -0.0045947244 -0.0040262306 0.0072810573 0.0134192832 -0.0124555799 -0.0003743683 0.0389255578 -0.0193614277 -0.0007177927 0.0429188375 -0.0187700644 0.0060295216 0.0259623465 -0.0108748439 0.0218209821 -0.0237235619 0.0023008975 0.0085876636 0.0069892372 -0.0127304209 -0.0072248983 0.0597586303 -0.0257067791 -0.0068089514 0.0604923758 -0.0240444457 0.0053416298 0.0325342841 -0.0094267165 -0.0222564772 -0.0431198867 -0.0019094361 0.0137107907 0.0487003793 -0.0653565399 -0.0068136764 0.0458960207 -0.0178966965 -0.0152831279 0.0916374311 -0.0406691491 0.0059603291 0.0055686100 0.0558246726 -0.0173454693 -0.0032711609 0.0280997369 0.0119340043 -0.0294071132 0.0289492690 -0.0135515198 -0.0788303580 -0.0388641557 0.0361903576 -0.0215922006 0.0503960426 -0.0115400359 -0.1090635107 -0.0718128366 -0.0432832574 -0.0482795870 -0.0230518124 -0.0411149510 -0.0880070788 -0.0661596085 -0.0689679616 -0.0538277068 -0.0405391876 -0.0618714139 -0.1245665544 -0.1204150581 -0.0146966567 0.0145425044 0.0205550098 0.0070956155 0.0022707847 0.0059092956 -0.0184364065 0.0167095067 0.0219171104 0.0010665482 0.0066509702 0.0096544707 -0.0341879982 0.0239183114 0.0306068277 -0.0004961856 0.0069516848 0.0113600066 0.0270462904 -0.0075500649 -0.0069383500 0.0249877562 -0.0057710132 -0.0062771084 0.0462240151 -0.0173089830 -0.0182250352 0.0421577572 -0.0144171070 -0.0173059111 -0.0337380405 -0.0125705420 0.0015824441 0.0046769544 -0.0402750276 0.0209646116 -0.0330986704 0.0084241986 -0.0685708156 -0.0953642989 0.0155157498 0.0334247810 -0.0065119243 -0.0436062341 0.0578123290 -0.0139264444 -0.0214728693 0.0716171320 -0.0044010982 -0.0549766381 0.0439439140 -0.0002950311 -0.0570297485 0.0752416106 0.0141183559 0.0022124054 0.0146457021 0.0056609975 0.0036900333 0.0025932765 0.0106851951 0.0052779314 0.0074315317 0.0236891260 0.0066476945 0.0178755578 0.0197718431 0.0007705398 0.0119764437 0.0247449901 0.0051844174 -0.0012719290 0.0252199924 0.0003518575 0.0100419530 0.0010502086 -0.0040676819 -0.0035977737 0.0131823298 0.0046581453 -0.0080627120 -0.0109393023 -0.0038727140 -0.0080328163 0.0313055863 0.0091410485 -0.0042528755 0.0179649319 -0.0033018349 -0.0022758388 0.0206078494 -0.0032540192 -0.0067884056 0.0238193730 -0.0063198004 -0.0042000051 0.0157980148 -0.0122927599 -0.0085391614 0.0231064713 0.0194034259 -0.0737880763 -0.1087211608 -0.0308280035 -0.1183620406 -0.0771070332 -0.0217890961 -0.1037548626 0.0032652394 0.0081963441 -0.0683146824 -0.0634444768 -0.0261877939 -0.1373281294 -0.0489420819 -0.0062553117 -0.0435689952 -0.0095283286 0.0098502733 -0.0328155588 -0.0147235180 -0.0133454907 -0.1101579990 -0.0834502599 -0.0387257296 -0.1819151432 -0.0578335471 -0.0045702559 -0.0085699870 0.0097508675 0.0217729309 0.0059627013 0.0226660088 0.0199966492 -0.0635118473 0.0144234578 0.0183028315 -0.0744608199 0.0418163650 -0.0043624177 -0.0691440985 -0.0197289627 -0.0165836016 -0.0390810649 -0.0637618765 -0.1144420036 0.1660129943 -0.0179779586 -0.0889615722 -0.0328088701 -0.0482730759 0.0068995149 0.0438366629 -0.0717786170 -0.0403538319 0.1457128565 -0.0394687626 -0.1381077022 0.0715024833 0.0039197474 -0.1082483064 -0.1030838293 -0.0518668817 0.0575436758 0.0396368205 -0.0908653937 -0.0194513752 0.2085872806 -0.0341095698 -0.1945283413 0.0825916458 -0.0782896089 -0.1519554451 0.2536456181 0.0178517906 -0.0243727064 -0.1291017913 0.0212869025 -0.0455837108 -0.0809677836 0.0093983543 0.0111602741 -0.0087648507 -0.0140166415 0.0961589682 0.0065495277 -0.0291491657 0.0854993362 0.0245978610 -0.0446571342 0.1001428066 0.0705338520 -0.0109674221 0.0085182603 0.0362955391 -0.0855872061 -0.0559394212 0.0297577824 0.0035491370 -0.0124406802 0.0261704298 0.1011306492 0.0099582943 0.0344562477 -0.0471912595 0.0577463021 0.0073064244 -0.0753539507 0.0214430558 0.0649442530 -0.0276809638 0.0023024387 0.0007131246 -0.1021182348 -0.1099672218 0.1518723075 -0.1787309604 -0.1060361003 -0.0513151238 0.0245909737 0.0019694789 0.0162103820 0.0100631028 -0.0371706298 0.0182354880 -0.0127021082 -0.0153576091 0.0329667200 0.1498416551 0.0618633653 0.0573024230 0.1372552524 -0.0596067079 0.0055490112 0.0999534912 0.0237462348 0.0403032145 -0.0776255888 0.0548190944 0.1079181516 -0.0826934254 -0.0136934498 0.0505796601 -0.0881060149 -0.0070602664 0.0771736228 0.0110446577 -0.0019145579 0.0125005384 0.0170537338 -0.0001694141 0.0057171709 0.0215618317 0.0115725380 -0.0124989595 0.0165257712 0.0177614276 -0.0199358184 0.0080942875 0.0074816258 -0.0061619506 0.0049010379 -0.0010757398 0.0095249683 0.0187454447 -0.0037070393 0.0100383033 0.0289716410 0.0188298900 -0.0241404563 0.0196589590 0.0432572671 -0.0480362996 0.0049969233 0.0112586944 -0.0110212391 -0.0015782820 -0.0032942971 0.0168590894 0.0144709433 0.0147444006 -0.0016381019 0.0192924965 -0.0005520673 0.0122463799 0.0184749613 -0.0190841489 0.0176603765 0.0072096092 -0.0097795599 0.0071995966 0.0035003980 0.0051347225 -0.0058979052 0.0169173868 0.0262266405 -0.0060009451 0.0244149681 -0.0016271582 0.0181032102 0.0302774573 -0.0569658400 0.0381258188 0.0036451936 -0.0193012516 0.0107206165 -0.0028498668 0.0071547711 -0.0123698875 0.0076897809 0.0201180160 -0.0354282189 0.0359013068 0.0877231751 -0.0819762472 0.0221487581 -0.0312121106 0.0233863011 0.0497735269 -0.1173741039 0.0729588604 0.0129826446 0.0074672504 -0.0001328612 0.0213269237 0.0122252313 0.0136209940 0.0049349913 0.0030872763 -0.0307166188 0.0070425197 0.0042660332 -0.0459854402 -0.0040197496 -0.0023615110 -0.0450153416 0.0001148232 -0.0009929403 -0.0734594106 0.0253508890 0.0175597506 0.0077437175 0.0173956617 0.0127704424 -0.0229323710 0.0340584792 0.0227293034 0.0227560042 0.0189202100 0.0142801179 -0.0305115674 0.0172184252 -0.0117743754 0.0137731680 0.0005561666 -0.0119271666 0.0085612977 0.0214610894 -0.0241786325 0.0272255829 -0.0003033519 -0.0323058786 0.0372470158 0.0413635295 -0.0257173414 0.0305581105 0.0015714547 -0.0398567427 0.0469592645 -0.0226068927 -0.0206267312 0.0190261916 -0.0245815658 -0.0291596978 0.0354210027 -0.0405569320 -0.0198583296 0.0136733311 -0.0435886049 -0.0337271378 0.0444546428 -0.0240517351 0.1040127503 0.0013485421 0.0127123497 0.0655258741 0.0289732634 -0.0293063542 0.1111124202 -0.0637225763 -0.0692091938 0.1435961976 0.0385592613 -0.0194008225 0.0826409045 0.0063538134 -0.0243884421 0.0554751722 -0.0016946137 -0.0078221140 0.0750984577 0.0098410100 -0.0319129879 0.0922845923 -0.0055527907 0.0004720467 -0.0238717283 -0.0132594773 -0.0137612816 -0.0275652185 -0.0471202630 -0.0065469465 -0.0237431118 -0.0364986611 0.0114550401 -0.0105330413 0.0001375427 0.0077613831 -0.0185996284 -0.0060586291 0.0067525542 -0.0061351527 0.0047990808 0.0094044415 -0.0071035816 0.0041140406 0.0103947341 -0.0039736068 0.0094788866 0.0094463097 -0.0037179754 0.0101201918 0.0098223774 -0.0036403735 0.0098656584 0.0121611430 -0.0183094413 -0.0002377150 0.0070624381 -0.0208530303 -0.0128879128 0.0177935712 -0.0009779668 -0.0506783662 -0.0240175892 0.0122491383 -0.0927504793 0.0725186639 0.0095061051 -0.0561867743 0.0920005944 0.0149026445 0.0653606777 -0.1318948999 -0.0622811749 0.0073840326 -0.0868403908 -0.0407833735 0.0161806048 0.0323458588 0.0159046340 0.0389497882 -0.0472405731 -0.0562743618 -0.0212402576 -0.0691453337 0.0027685732 0.0665766634 -0.0063547306 0.0312063133 0.0781178046 0.0135348086 -0.0252816002 -0.0111269966 -0.0616516803 -0.0906127373 -0.0650919801 -0.1009878894 0.0153781887 0.0989550577 0.0103262333 0.0630294198 0.1198129278 0.0728125650 0.0271691798 0.0495220787 0.0449004272 0.0240198428 0.0196712591 0.0384986041 0.0350303474 -0.0308655642 0.0183900897 0.0117261793 0.0212884266 -0.0484397702 -0.0267435544 0.0382171205 0.0182226271 -0.0264663487 0.0222992869 -0.0172611941 0.0313682969 0.0235281599 -0.0513751522 0.0128056227 0.0315405829 -0.0144282525 -0.0471583380 0.0330119368 0.0444436072 -0.0421968251 0.0166268050 -0.0235096055 0.0612188806 0.0129425514 -0.0776963769 0.0283616525 0.0298951056 -0.0127423530 -0.0789240118 0.0360374115 -0.0739634759 -0.0419398231 0.0456557124 0.0464368030 -0.0342650716 -0.0569863496 0.0429980440 -0.0422353319 -0.0771180869 0.0082332262 -0.0010436201 0.0103009161 -0.0281650023 -0.0345322969 -0.0073214135 -0.0082814263 -0.0193950371 -0.0296598216 0.0046673589 -0.0298985132 -0.0896931067 -0.0256858822 0.0444534354 0.0046980983 0.0397344684 0.0811658325 -0.0624963169 0.0052674013 0.0799703462 0.0290156980 -0.1692360403 -0.0258490734 0.0726780289 0.0125728412 0.0114658720 -0.0113040648 0.0509903751 0.0338539131 -0.0441016385 0.0029502964 0.0939544162 -0.0804067705 0.0483725381 0.1119382462 -0.1290813096 0.1192186461 0.0595399818 -0.0413266849 -0.0124132185 0.0642742714 0.0031705974 0.0032058204 0.0954606499 0.0537719557 0.0460669545 0.0649259200 0.0292827024 -0.2012239781 -0.0578800303 0.0655835152 -0.2028293228 0.0276605126 0.1782472103 -0.2187957511 -0.0988578438 0.0292650697 0.0740477750 0.0111760835 -0.0670046776 0.0543330076 0.0755423251 -0.0403378381 0.0549094329 0.0320863405 -0.0475135450 -0.0046975608 -0.0275582592 0.0145848241 0.0316732579 0.0676377559 -0.0569066010 0.0356680989 0.0790395740 -0.0538897156 0.0045537862 -0.0076592150 0.0202666483 -0.0343585554 -0.1147335775 0.1115333045 -0.0412503644 -0.1284528369 0.1123961498 0.0565872152 0.1346395603 -0.1242070717 0.0613629039 0.1564163189 -0.1180997049 0.0057323489 0.0089848753 -0.0066138586 -0.0630066306 -0.1886319331 0.1739706649 -0.0715395133 -0.2158805752 0.1776421228 -0.0078776372 0.0276145415 0.0002303931 -0.0086226653 0.0322745732 -0.0051141072 0.0041493228 0.0155657345 -0.0008573274 0.0195998634 -0.0113345824 0.0097360210 0.0231493478 -0.0215842571 0.0162262348 -0.0172777231 0.0432968822 -0.0046822036 -0.0180970293 0.0474462326 -0.0126104993 0.0020539028 0.0242532408 -0.0073541091 0.0290187643 -0.0236961948 0.0129528560 0.0374201158 -0.0437990677 0.0253510382 0.0027146178 0.0562028947 -0.0406700487 0.0089218852 -0.0233029597 0.0042333021 -0.0016634596 0.0374812354 -0.0146247952 0.0027485085 0.0175942414 -0.0051105324 -0.0016847366 -0.0144685965 -0.0274269670 0.0098545367 -0.0037019113 0.0010540914 -0.0061460246 -0.0074734464 -0.0319672353 0.0047207469 0.0141082567 0.0017947835 -0.0178346752 -0.0173299097 -0.0574093212 0.0020477934 0.0207724752 0.0023718182 0.0215398460 0.0171078233 0.0321726965 0.0190204974 0.0271898709 0.0372982333 0.0343023326 0.0247491355 0.0535485355 0.0280378481 0.0436318871 0.0666343684 0.0070722933 -0.0037909898 0.0064500228 0.0111331533 -0.0038210438 0.0077360892 0.0019864139 0.0001896028 0.0081089144 0.0045948300 0.0021684329 0.0072386756 -0.0035849124 0.0017970164 0.0094135643 0.0007121279 0.0053646771 0.0075971539 0.0147678573 -0.0026235260 0.0062628598 0.0124284754 -0.0000579521 0.0056441653 0.0191651073 -0.0038346443 0.0056673594 0.0155331529 0.0007649157 0.0041996817 -0.0490749039 -0.0089613098 -0.0073020460 -0.0678051838 -0.0060213774 -0.0081969072 -0.0368110225 0.0139729302 -0.0032073963 -0.0606448208 -0.0144270895 -0.0092606472 -0.0249076459 -0.0556246782 0.0250544487 -0.0379599685 -0.0229235932 0.0474619669 -0.0168894230 -0.0700920135 0.0134607172 -0.0192675045 -0.0762012830 0.0524973564 -0.0011716816 -0.0194797125 -0.0149022763 -0.0022661602 -0.0119901544 -0.0009353653 -0.0012489187 -0.0155945965 -0.0100459794 0.0013327388 -0.0239398925 -0.0339189687 0.0012303444 -0.0182486163 -0.0146195525 -0.0031755939 -0.0191356538 -0.0086075872 0.0048015337 -0.0191233463 -0.0268278681 0.0048059411 -0.0003251626 0.0024171345 -0.0007191877 -0.0145929611 0.0012865941 0.0103291318 0.0050276316 0.0133549154 -0.0171202118 -0.0165256137 0.0005816888 0.0039481569 -0.0113250160 0.0110351576 -0.0082018834 -0.0059028996 0.0177686911 -0.0098099424 -0.0003463137 0.0183635780 -0.0035990499 -0.0013348026 0.0174121911 -0.0444077431 -0.0253505924 -0.0709865057 0.1319405321 -0.0465824105 0.0968817032 0.0941772955 -0.0414579030 0.0572050943 -0.0074555024 -0.0349446516 -0.0382529927 0.0954665081 -0.0451997878 0.0963364220 0.0418261867 -0.0331299717 -0.0368780972 -0.0072400015 -0.0318967167 -0.0784174007 0.0367723645 -0.0384639022 0.0374587226 0.1336152485 -0.0500971585 0.1676976598 0.0385375595 -0.0289374499 -0.0758426973 -0.0497342231 -0.0253351354 -0.1492675545 -0.0445912997 -0.0258855188 -0.0719376471 -0.0349819587 -0.0243363762 -0.0621082629 -0.0272045814 -0.0324667382 -0.0441486430 -0.0306412128 -0.0290199012 -0.0479913892 0.0255322028 -0.0497081502 0.0869543325 -0.0160645386 -0.0346083652 -0.0143815120 -0.0232184708 -0.0315622847 -0.0292674124 0.0049870277 -0.0418716430 0.0384906046 0.0128430916 -0.0451667213 0.0550944841 -0.0247141912 -0.0310719292 -0.0337288058 -0.0369379893 -0.0253825641 -0.0590489853 0.0112429619 -0.0427937640 0.0555387043 0.0267325598 -0.0504471774 0.0885712358 0.0504238955 -0.0582660346 0.1472803949 0.0134331641 -0.0332906900 0.0505980618 0.0148554983 -0.0121984293 0.0413769793 -0.0007121149 -0.0149112737 0.0005991085 -0.0387720050 0.0442783570 -0.0229801143 -0.0123469670 0.0192931749 0.0144874005 0.0459917898 -0.0697649862 0.1269231777 0.0130433818 0.0308627428 0.0570568919 0.1257741666 0.1060223015 -0.0080766280 -0.0765605080 0.0355358014 0.0429018791 -0.0182537178 0.0217771207 0.0669161953 -0.0319671574 0.0775228485 -0.0433780928 0.0069685829 0.0701887766 -0.0275615035 0.0114200037 0.0361576692 0.0171902453 0.1631108031 0.1745427174 -0.2130977765 0.2901030507 0.1636679845 0.1120462887 -0.1038327720 0.0173448180 0.0504084477 -0.0870841478 0.0620738590 0.0071471969 -0.0818143636 0.0188908136 0.0574027658 -0.0731450976 -0.0216537807 0.1004359652 -0.0459400438 0.0817005209 0.0387658982 0.0416134386 -0.0018380034 0.0696360955 0.1245109067 0.0670775749 -0.0026092561 -0.0227570986 0.1435447217 -0.1070661590 -0.0544388150 -0.0006629646 0.0298670751 -0.0018650866 -0.0198013267 -0.0079837967 -0.0028384537 -0.0081814258 -0.0115796175 0.0003264854 -0.0002709526 -0.0094659687 0.0046228973 -0.0045922136 -0.0038958246 0.0047648250 -0.0198307140 0.0031876978 0.0009285092 -0.0279701521 0.0016680894 -0.0049324369 -0.0023851663 -0.0185280942 0.0002250471 0.0126367021 -0.0154540532 0.0093465002 0.0133711660 -0.0098388987 0.0076471714 -0.0237037991 0.0080880609 0.0013086796 -0.0390103149 0.0057381077 0.0301933649 -0.0859342545 0.0142683503 0.0225535624 -0.0696834229 0.0051668592 -0.0145655526 0.0139749764 -0.0180297745 -0.0440939160 0.0830471788 -0.0340899926 -0.0387497291 0.0664394601 -0.0248818465 0.0555039890 -0.1510640293 0.0358520251 0.0431194730 -0.1168298388 0.0171372987 -0.0185656814 0.0271451671 -0.0259492689 -0.0710685832 0.1476497776 -0.0528705966 -0.0653319193 0.1216484080 -0.0370557670 0.0144831898 0.0181774172 -0.0116705043 0.0082025570 0.0245928274 -0.0134942766 -0.0407502057 0.1003826197 -0.0679464628 0.0008381787 -0.0360652258 0.0087670884 0.0010789365 -0.0112181364 -0.0061810228 0.0003936901 -0.0210679800 -0.0307875413 0.0071856475 0.0076454476 0.0363908415 0.0111746628 0.0159625930 0.0523355547 0.0097764266 0.0176413484 0.0613835204 0.0167943906 0.0332730116 0.0913851560 0.0023717013 -0.0179195626 -0.0286014059 0.0085092002 0.0012178005 0.0145064048 -0.0003707523 -0.0265172964 -0.0515632232 0.0117878934 0.0068808965 0.0216678824 0.0071549931 -0.0025434835 -0.0267955965 0.0035882998 0.0087585377 -0.0084414479 0.0049824341 0.0098599059 -0.0432158408 -0.0008884945 0.0338865537 -0.0353482355 0.0047089178 0.0011636333 -0.0602472716 -0.0037138059 0.0428791147 -0.0460367865 -0.0015642395 0.0341084153 0.0000760044 -0.0057485194 0.0464093006 -0.0130872115 -0.0030086016 0.0443348027 0.0190137333 -0.0122055008 0.0651172520 -0.0054527220 -0.0733879868 0.0755380491 -0.0556193544 -0.0780742459 0.0863241095 -0.0639685179 -0.0606811376 0.1047735518 -0.0699177498 -0.1122654222 0.0608727792 -0.0591526967 -0.0369794256 0.0173280614 0.0086637741 -0.0492358110 0.0221975234 0.0210390598 -0.0210826212 0.0057181878 0.0104802119 -0.0363584314 0.0116537116 0.0147629086 -0.0123176158 -0.0040558605 -0.0086592347 0.0019778701 -0.0070404769 0.0084965895 -0.0069183110 -0.0094875642 0.0008210338 -0.0272963038 -0.0061922094 -0.0035349475 -0.0219300285 -0.0051831460 -0.0153136255 -0.0180612249 -0.0045302888 0.0111661872 -0.0298634324 0.0050386095 0.0089050634 0.0048488887 0.0063268052 0.0147544220 -0.0102616845 -0.0022095089 0.0198942994 0.0232265861 0.0025309404 0.0158540409 0.0030524160 -0.0177940880 -0.0031819541 -0.0241133632 -0.0083559568 -0.0330179337 0.0055535396 -0.0115244096 -0.0499418555 -0.0169538289 -0.0122311371 -0.0788519231 0.0494893465 -0.0090776591 -0.0570139204 -0.0000587709 -0.0112390778 -0.0079368353 0.0821784188 -0.0419806589 0.0912061991 0.0656970961 -0.0340302310 0.0659066194 0.0211041124 -0.0173574925 0.0060849435 0.0708682654 -0.0381177865 0.0795931670 0.0359596691 -0.0204388641 0.0160360570 0.0157773636 -0.0135001844 -0.0105760517 0.0429050637 -0.0268488763 0.0405507528 0.0919983979 -0.0470499861 0.1161490303 0.0282044668 -0.0155367310 -0.0014974253 -0.0062884198 -0.0037117426 -0.0444050822 0.0047671737 -0.0139820646 -0.0076941899 0.0104116528 -0.0131278091 0.0021474807 0.0116100951 -0.0159064890 0.0135321749 0.0118900408 -0.0062784280 -0.0126564111 0.0348789722 0.0012842324 -0.0042648220 0.0232630061 -0.0003719292 0.0138201305 0.0119404374 -0.0086544974 -0.0353872509 0.0224370675 -0.0048829796 -0.0319595225 0.0346834658 0.0034995969 0.0182500750 0.0242388367 0.0007824246 0.0329385195 0.0049667198 -0.0121792456 -0.0515403583 0.0206356240 -0.0062103864 -0.0468198758 0.0438310683 0.0083714791 0.0405720812 0.0441202478 0.0043861456 0.0000640029 0.0327829020 -0.0230588403 0.0308316961 0.0283177145 -0.0088818879 -0.0152524606 -0.0041722601 -0.0077864178 0.0168273654 0.0244701357 0.0575369642 0.0075064931 -0.0096165317 0.0693145161 -0.0030443409 -0.0761437266 0.1602632952 -0.0732116524 -0.0274489808 0.0219960398 -0.0136770718 -0.1537074723 -0.0828984765 -0.0117590567 0.0439367654 0.0269178324 0.0029840115 0.0598405778 -0.0137339156 0.0201139322 -0.0011805827 -0.0082065012 0.0423939419 -0.0510657013 -0.0333161465 0.0809328015 -0.0321420175 0.0265431814 -0.0638422278 -0.1929388275 -0.1712770839 0.2258677545 -0.3270159567 -0.1820472733 -0.1669431805 0.0683894209 0.0434546254 0.0001590048 0.0537466121 -0.0047383541 0.0198105411 0.0329491625 0.0409042877 -0.0062048233 0.1362624092 0.0615913197 0.0318102887 0.1047126469 -0.1091962039 0.0519851246 0.0029513581 -0.0235956216 0.0031555524 -0.1539688981 -0.0018227328 0.0964868376 -0.0296072172 -0.1234373472 0.1418779812 -0.0051478804 -0.0018079973 0.0384215007 -0.0119857635 -0.0008663143 0.0018082081 0.0023462327 0.0409498920 -0.0284414454 0.0018340452 0.0405708324 -0.0207350580 -0.0133590230 -0.0038403754 0.0176018318 -0.0292688954 -0.0497765123 0.0557666149 -0.0296710880 -0.0497562221 0.0492982688 0.0143451729 0.0735450843 -0.0617029069 0.0120450656 0.0740021424 -0.0474392511 -0.0152693920 -0.0082256384 0.0157652253 -0.0430930803 -0.0878130470 0.0882563937 -0.0427078129 -0.0890731975 0.0780671196 0.0252890468 -0.0849024265 0.0269354068 0.0224458075 -0.0730611091 0.0115150553 -0.0056621444 0.0113257849 -0.0125028638 -0.0326493253 0.0855577922 -0.0240861388 -0.0333858556 0.0747150797 -0.0094880325 0.0461093605 -0.1525356898 0.0497957756 0.0397096534 -0.1241949033 0.0185610325 -0.0038867829 0.0203470325 -0.0278277900 -0.0538994766 0.1506013706 -0.0436368587 -0.0578936700 0.1357067430 -0.0174423227 -0.0138709336 0.0186339737 -0.0027136999 -0.0184043383 -0.0383015960 0.0315563423 -0.0117808509 0.0773276260 -0.0601833781 0.0054343713 -0.0284013469 -0.0088931463 -0.0114600885 -0.0175873958 0.0054084471 -0.0234711221 -0.0174730734 0.0020275663 -0.0022164307 -0.0277554837 0.0207651740 -0.0098330016 -0.0385994711 0.0308836080 0.0123565332 -0.0265941948 0.0248960494 -0.0030344890 -0.0447048079 0.0433061666 -0.0330502006 -0.0313895125 0.0087177967 -0.0248465005 -0.0411550362 0.0225078395 -0.0471355789 -0.0331321536 0.0019038707 -0.0306681108 -0.0494390483 0.0268694537 -0.0232262793 0.0203293143 0.0058680287 0.0058394221 0.0138310931 0.0031482389 -0.0306342437 0.0350651891 -0.0068662147 0.0086105649 0.0354243308 -0.0276626089 -0.0636501964 0.0421625827 -0.0037897267 0.0066128445 0.0430601099 -0.0373246092 0.0475476592 0.0144754234 -0.0186983484 0.0524692164 0.0224123179 -0.0380930398 0.0795500766 0.0070509933 -0.0206238727 0.0880111286 0.0191817737 -0.0576159284 0.0688707332 0.0152654081 0.0605233087 0.0985751565 -0.0266329802 0.0912418825 0.0464230729 -0.0236402372 0.0398438988 0.1000978894 0.0654807421 0.0912111379 0.0244606529 0.0774883340 -0.0176375840 0.0270990318 0.0395202372 -0.0360026952 0.0191309278 0.0898844001 -0.0048356759 0.0200443271 0.0974009967 -0.0437587833 0.0000593683 0.0066046208 0.0094423697 0.0008734394 0.0016371561 0.0008395495 0.0003967422 0.0036984603 0.0060348023 -0.0036677354 0.0128157628 0.0224196262 -0.0047894712 0.0050089576 0.0052279443 0.0091942448 0.0074546820 -0.0003849643 -0.0041722652 0.0116392965 0.0172316011 0.0073490997 -0.0005060948 -0.0031196329 0.0082177926 0.0084409663 -0.0010522608 0.0024257054 -0.0030758749 -0.0092365051 0.0298284025 -0.0016226919 -0.0154505609 -0.0083397557 -0.0062239513 -0.0243969300 0.0222538452 -0.0084426157 -0.0497647260 0.0050201705 -0.0245746626 -0.0827873984 0.0360815049 0.0049630787 -0.0486498830 -0.0594422890 -0.0448387556 0.0203326936 0.0120871878 0.0889694678 -0.1283480691 -0.0024042176 0.0589637392 -0.1000030732 -0.0346181385 -0.0238918660 -0.0169570648 0.0039556158 0.0492265072 -0.0077154415 -0.0231791568 0.0265255982 -0.1493820498 -0.0409731500 -0.0151557422 -0.1075124414 -0.0108639646 0.0077678576 0.0371385424 0.0213949722 0.0727847087 0.0364243631 -0.0245177064 0.0313647054 -0.2217288619 -0.0632173533 -0.0355430189 -0.1533900722 -0.0518496728 -0.0516294022 0.0097681445 -0.0442296977 -0.0481163154 0.0156185157 -0.0444908334 -0.0511655573 0.0421100438 -0.0154289401 -0.0325198524 0.0079815047 0.0570408066 0.0257729618 -0.0590196979 -0.0349107985 0.0252492247 -0.0398919073 0.0436836193 -0.0635399866 0.0305756168 0.0826312354 -0.0352224807 0.0004073093 -0.0005600306 0.0571064656 -0.0786945468 -0.0791646304 0.0494152337 -0.0533832847 0.0640442558 -0.1086606241 0.0723652983 0.1262309425 -0.0585099202 0.0184607949 -0.0199111729 0.1065785155 -0.1239222553 0.0831903870 0.0491505304 -0.0892745321 -0.0067817700 -0.0007961567 0.1227493499 -0.0118588538 0.0100826055 0.0558794066 0.0017815654 0.0134478004 0.0077450576 -0.0095336915 -0.0013669056 0.0453584166 -0.0101446862 -0.0028632997 0.0457603209 -0.0105509203 0.0002579913 0.0492435647 -0.0168313142 0.0251355034 -0.0092245401 0.0527462687 0.0517721223 -0.1170284322 -0.0560215813 0.0560233358 -0.0010735731 0.0180675078 -0.0147933724 0.0283325380 -0.0104065530 -0.0115308526 0.0511227937 -0.0273230051 -0.0091191737 0.0446342573 0.0088802329 0.0733821207 -0.1410470219 0.0631053965 0.0867145406 -0.1939264926 0.1477988669 0.0239811375 -0.0929439150 -0.0469893216 0.0631757402 0.0180034591 -0.0532841964 0.0465044466 -0.0069933647 -0.0668912514 0.0717246291 -0.0123789560 -0.0138187704 -0.0279288102 0.0948503984 0.0090657519 0.0082569854 -0.0085345508 0.0824937601 -0.0539602935 0.0251617421 -0.0793566914 -0.0090250888 0.0312050400 -0.0151766704 -0.0403730711 0.0774467636 -0.0015931147 0.0241800659 0.0203184016 0.0023527870 0.0089455401 0.0088816535 0.0120832256 0.0218012044 -0.0051930183 0.0118032598 0.0203579698 -0.0068521828 0.0027774957 0.0048800120 0.0050107775 -0.0057644086 -0.0059456911 0.0188721940 -0.0053213484 -0.0046692898 0.0212367598 0.0187172678 0.0305990664 -0.0133725800 0.0163200591 0.0289448547 -0.0156106430 -0.0011759499 -0.0110985854 0.0070818856 -0.0140756597 -0.0187711518 0.0284266973 -0.0116393753 -0.0161234725 0.0321080997 -0.0490499121 0.1295006895 -0.0149145717 -0.0413545474 0.1108609566 -0.0022393358 0.0032860736 0.0005115042 0.0275587296 0.0473872230 -0.0996105768 0.0517122810 0.0524916764 -0.1016927276 0.0442880934 -0.0855185632 0.2261538849 -0.0469638564 -0.0699220567 0.1779657730 -0.0192447510 0.0052584002 -0.0180594424 0.0364814614 0.0818063478 -0.1815777464 0.0762326655 0.0970323152 -0.1957619782 0.0644713788 -0.0051722351 -0.0048596396 0.0021674838 -0.0009316210 -0.0319044934 0.0164222764 -0.0568066216 0.1644096495 -0.0673639370 0.0693425415 -0.2193972865 0.1516032095 -0.0011176657 0.0009406224 0.0035125245 -0.0018936467 0.0100913509 0.0246788007 -0.0044038824 -0.0150088402 -0.0269451060 -0.0077913984 -0.0209470944 -0.0317956524 -0.0047018530 -0.0240930556 -0.0494682559 -0.0109758892 -0.0351261615 -0.0595676003 -0.0037486765 0.0077874914 0.0311041118 -0.0069038044 -0.0077489367 0.0021788260 -0.0029168880 0.0153607094 0.0508717339 -0.0092926974 -0.0112612875 0.0030741840 -0.0077729553 0.0066430903 0.0187506623 0.0088164713 -0.0057151151 0.0019980320 -0.0188493697 0.0077683464 0.0328221510 -0.0053447724 -0.0076261914 0.0225922354 -0.0348634417 0.0189036308 0.0492701214 -0.0127206922 -0.0072947291 0.0325828765 0.0250021107 -0.0234423399 -0.0106230482 0.0208399392 -0.0250227248 -0.0019186080 0.0412051987 -0.0358731295 -0.0281609162 0.0356133596 -0.0385576847 -0.0127785304 0.0030295868 -0.0136719547 0.0588343778 0.0041697455 -0.0172535992 0.0608845201 -0.0010591407 -0.0218438295 0.0616863214 0.0137619577 -0.0081705686 0.0609309005 -0.0143004929 0.0232953849 0.0056417108 0.0174829990 0.0234623455 -0.0167420661 -0.0424760964 0.0395280526 -0.0057724504 -0.0206986069 0.0300805943 -0.0037414562 0.0009417971 -0.0079722105 0.0036837273 -0.0039999577 -0.0027903130 0.0070177408 -0.0005984771 -0.0030543780 0.0067767562 0.0027688288 0.0042041912 0.0185975262 -0.0025513917 -0.0090409279 -0.0008852701 0.0141958676 0.0077539730 0.0076134848 0.0064967191 0.0079219705 0.0218245377 -0.0181805957 0.0236674903 0.0267905985 -0.0018951325 0.0152754458 0.0144939654 -0.0255306757 0.0262976494 0.0281151011 0.0502957380 0.0021318460 -0.0169039545 -0.0081964303 -0.0181798098 -0.0329842011 0.0240893964 -0.0259829368 -0.0549999194 0.0215579883 -0.0626212466 -0.0838108585 0.0210020634 -0.0160271873 -0.0515636679 -0.0881182299 -0.0179438281 0.0049999103 -0.0190358599 0.1092598703 -0.1481810486 -0.0268959551 0.0730213802 -0.1038502141 -0.0547613044 -0.0057514195 -0.0141513997 -0.0444242363 0.0784220893 -0.0490543611 -0.0112712285 0.0219455449 -0.0968239988 -0.0300960993 -0.0148266324 -0.0587610511 -0.0470449259 0.0318403133 0.0108743967 -0.0483290525 0.1143550691 -0.0403561001 0.0147445642 0.0104357148 -0.1207517785 -0.0236620385 -0.0512970376 -0.0622756799 -0.0774371149 -0.0259348174 0.0014184323 -0.0680518618 -0.0204122820 0.0126832235 -0.0679857799 -0.0241345827 0.0411305571 -0.0438348544 -0.0060885907 0.0097472716 0.0358110099 0.0396971214 0.0007354971 -0.0486806644 0.0410458270 -0.0010070637 -0.0005816342 -0.0289370141 0.0177329685 0.0419961224 -0.0077726100 0.0149385117 -0.0093278872 0.0647901830 -0.0090171244 -0.0835711937 0.0610069383 -0.0027988923 0.0057878543 -0.0612865007 0.0292508883 0.0770502213 -0.0273496625 0.0220119886 -0.0143832991 0.1021797726 -0.0199797435 0.0672048660 0.0564318542 -0.0027079287 -0.0371676921 0.0239030458 0.0881441029 -0.0429579570 0.0207453057 0.0397561992 0.0129423294 0.0010902625 0.0115351436 -0.0118929734 0.0126485853 0.0306755771 -0.0232109365 0.0169142754 0.0245339575 -0.0229055015 0.0167353015 0.0380845992 -0.0266013780 0.0336262801 -0.0089092234 0.0594442172 0.0665205237 -0.1432536642 -0.0750856974 0.0834177368 0.0061549526 0.0003587808 -0.0404084173 0.0617951697 -0.0329535512 0.0192059511 0.0097967214 -0.0495191347 0.0228396393 0.0017817815 0.0075967290 0.0835599301 -0.1658905575 0.0714754548 0.1155117665 -0.2428512218 0.1803679554 0.0392061975 -0.1065955967 -0.0725064421 0.0866666197 0.0320781575 -0.0743316171 0.0786896672 -0.0048867609 -0.0893788661 0.1027378653 -0.0078414831 -0.0286185050 -0.0459776814 0.1473134765 -0.0084239094 -0.0217768159 0.0528048303 0.0532445069 -0.1125914531 0.0414511100 -0.0355057354 0.0196020088 0.0011337635 -0.0589689354 0.0245580179 -0.0212038293 -0.0676288151 0.0278696770 0.0183336786 0.0022436313 -0.0082321411 0.0069639114 0.0144669189 0.0183516467 -0.0147358226 0.0170605318 0.0239926891 -0.0156149980 0.0088123055 -0.0007523345 0.0057221778 -0.0031919106 -0.0301154767 0.0318810173 -0.0059713444 -0.0349142179 0.0330728134 0.0208780652 0.0343110208 -0.0312127033 0.0229047781 0.0459292548 -0.0321679981 0.0077801570 -0.0066091692 0.0049217251 -0.0123607507 -0.0523098020 0.0503567594 -0.0143142532 -0.0611596523 0.0518937785 0.0696011917 -0.1123309803 0.0419017925 0.0747226325 -0.1228918361 0.0444827661 0.0411008297 -0.0444950800 0.0233190636 -0.0099213434 0.0577461504 -0.0073786825 -0.0277300548 0.0898844834 -0.0155654617 0.1014448351 -0.1847711199 0.0655514449 0.1045628107 -0.1884881372 0.0636808691 0.0530470864 -0.0614656724 0.0256832615 -0.0411490345 0.1161135898 -0.0245275923 -0.0751759152 0.1842335944 -0.0388561321 0.0064226111 0.0012698712 -0.0005327506 0.0071668602 -0.0203259631 0.0117638197 0.1327431688 -0.2706057034 0.1451195314 -0.0120068795 0.1312915044 -0.0900122293 0.0006743991 -0.0003258298 0.0059112484 0.0023690435 0.0055404278 0.0189292041 -0.0024633975 -0.0071427935 -0.0125618463 -0.0034665108 -0.0094003251 -0.0183144688 -0.0047466760 -0.0120522792 -0.0249106230 -0.0063001474 -0.0163606961 -0.0357619824 0.0023161768 0.0048804441 0.0182517017 -0.0009501844 -0.0028615914 -0.0009226535 0.0043495092 0.0082684753 0.0272693726 -0.0019958864 -0.0047989758 -0.0044601667 0.0042109045 0.0081083137 0.0244776232 -0.0124437529 0.0144637918 0.0292401571 0.0323407989 -0.0105159409 0.0154324951 0.0455944722 -0.0263776201 0.0054993393 0.0505086395 -0.0145860490 0.0136220326 0.0734565404 -0.0431558854 -0.0067740149 -0.0097980463 0.0026145946 0.0255962488 0.0222790721 -0.0190756478 0.0122258619 -0.0275657010 0.0078520928 0.0288439298 0.0302748114 -0.0301356113 0.0055095563 0.0048710098 -0.0043907719 0.0432806485 0.0107265699 -0.0100869038 0.0471076570 -0.0020772624 -0.0184167401 0.0462067520 0.0204401717 0.0034197305 0.0461130985 -0.0102653924 0.0423630833 -0.0015423191 0.0244287204 0.0493173061 -0.0225756579 -0.0443513073 0.0618465303 -0.0150413345 -0.0035094622 0.0426499009 -0.0045379690 -0.0018286879 -0.0095602851 0.0018256705 -0.0131296923 -0.0058517284 -0.0079880997 -0.0065148556 -0.0052664489 -0.0055756342 0.0089021233 -0.0092971977 -0.0069699391 0.0059126946 -0.0072551850 0.0080367280 -0.0006773950 -0.0083140336 0.0016949621 0.0118540802 -0.0132084244 -0.0090910779 0.0076780198 -0.0108251196 -0.0008646023 0.0063690534 -0.0122585084 -0.0001870390 0.0086430262 -0.0099644834 0.0009046151 -0.0202840544 -0.0039477879 0.0144269692 0.0084235632 -0.0040665764 0.0275623388 -0.0089592748 0.0127592631 0.0191549112 -0.0259836979 0.0257324095 0.0056778951 0.0067033112 0.0202903808 0.0183472947 0.0085534652 0.0150653987 -0.0340512474 0.0074940580 -0.0369417264 0.0382118311 0.0064149659 -0.0236185946 0.0189366918 0.0059484905 0.0079075903 -0.0244313857 0.0145786713 -0.0268227769 0.0052299623 -0.0054054592 -0.0036133175 0.0057138278 -0.0048776028 0.0121672457 -0.0159488945 0.0124874261 -0.0083347415 -0.0203892707 0.0214987565 -0.0416327041 0.0117203510 -0.0130648281 -0.0006335192 0.0144518236 -0.0109117449 0.0261642622 -0.0205157042 0.0088761425 0.0148307956 -0.0283452668 0.0031733695 0.0185240851 -0.0380340854 0.0092904555 0.0139270982 -0.0370544250 0.0011705927 0.0107891254 -0.0269540434 -0.0430901477 0.0045927672 -0.0775787124 -0.0270606942 0.0060174465 -0.0934680286 0.0142441409 0.0083439889 0.0279892793 -0.0078921027 0.0057898032 0.0037073666 -0.0507737179 0.0042369482 -0.1219817449 -0.0367178184 0.0070182317 -0.1386221363 0.0408463972 0.0057945681 0.0868438746 0.0010077194 0.0058538443 0.0421605620 -0.0770008380 0.0038660366 -0.1856059519 -0.0642349568 0.0040349261 -0.1061991558 0.0154728956 -0.0090192846 -0.0425201904 0.0178385289 -0.0084429327 -0.0189982409 0.0082090540 -0.0159285987 0.0005086235 -0.0407334573 0.0132787678 0.0057761814 0.0080159899 -0.0083152272 0.0321594019 0.0105251147 -0.0032879659 -0.0087358416 0.0009143985 0.0203175741 -0.0102301135 0.0109970931 0.0241394554 -0.0335628072 -0.0040878333 0.0459026314 0.0012549899 0.0065224419 0.0092853702 0.0015771966 0.0547180784 -0.0517922898 0.1301125951 0.0998310472 -0.1030305487 0.2189045624 -0.0584216655 -0.0175732576 -0.0178796559 0.0406670430 0.0269814270 -0.1287482644 0.0647601846 0.0684621096 0.0247652006 0.0078377199 0.0555692140 0.0208689447 -0.0006488134 0.0337811080 0.0018669090 -0.0170289033 0.0622036903 -0.0089975376 -0.0281237101 -0.0146667757 0.0358282015 -0.0075433033 0.0431129175 -0.0352881588 0.0624183874 -0.0036476522 0.0082721990 -0.2005760037 -0.0465257857 0.2139719858 0.2106974505 -0.2582750927 0.5042278596 0.3224968279 -0.0446223473 0.0131874505 0.0001151337 -0.0078735724 -0.0009726873 0.0023710297 -0.0030199759 -0.0046677487 0.0043918217 0.0015742582 -0.0072527887 0.0064668058 0.0028233975 -0.0080048545 0.0079187579 0.0043153145 -0.0102003189 0.0050271514 -0.0015550712 -0.0063649240 0.0015842070 -0.0039783741 -0.0033749382 0.0036524616 0.0023136928 -0.0068204683 0.0049165538 -0.0058781044 0.0013478079 0.0096921559 0.0068761745 -0.0121166024 0.0057602850 -0.0023794440 -0.0067622475 0.0189821348 -0.0373121731 0.0064623848 0.0154119307 -0.0316482883 0.0057158374 0.0038272436 -0.0098108272 0.0000067650 -0.0042355720 0.0054464979 -0.0053748481 -0.0031797047 0.0037493678 -0.0056124445 0.0274499908 -0.0552485883 0.0122921987 0.0206017797 -0.0411465433 0.0095452823 -0.0023455298 0.0034214296 -0.0020818282 -0.0126302129 0.0212904054 -0.0099187936 -0.0119939837 0.0196226682 -0.0105440419 0.0078137641 -0.0089582318 0.0046477445 0.0009373433 -0.0121893122 0.0082990582 -0.0029388064 -0.0084846950 0.0044276897 -0.0064692899 0.0268914759 -0.0111627803 -0.0030169359 0.0021201841 -0.0064623323 0.0056727066 -0.0010811461 -0.0118860932 -0.0078651160 0.0185024998 0.0004579916 0.0000407013 0.0315454912 0.0021704044 -0.0185353937 0.0214525431 0.0068845881 -0.0025348980 0.0439654246 0.0105033329 0.0139540648 0.0113457210 -0.0153670900 0.0103095583 0.0275463383 -0.0068168084 0.0241369306 0.0091169644 -0.0197255266 0.0164025118 0.0367899414 -0.0058671035 0.0154048489 -0.0148420170 -0.0103213727 0.0038741136 -0.0074604164 -0.0004675157 0.0192310953 -0.0162894217 -0.0132434497 -0.0016324239 -0.0040131247 0.0004249220 0.0342203595 -0.0237885185 -0.0229871176 -0.0021775456 -0.0026444760 -0.0010176454 -0.0181807916 0.0053823029 0.0142036248 -0.0244627463 0.0089451402 0.0175850358 -0.0330286949 0.0136018610 0.0242146632 -0.0451527115 0.0208951606 0.0312196489 -0.0890895310 0.0674224546 0.0058982982 -0.0830136526 0.0320578270 0.0326879033 -0.0721511465 0.1201778189 -0.0595521145 -0.1652805978 0.1008782904 0.0444132779 -0.0611307530 -0.0258226916 -0.0119667261 -0.0624047218 -0.0492835377 -0.0193209843 -0.0444427281 -0.0360688712 -0.0077932768 -0.0908969022 -0.0178727705 -0.0163321879 -0.0100803755 -0.0235171588 -0.0003150099 -0.0363716283 -0.0182374311 -0.0286390875 -0.0206641569 -0.0143033588 -0.0163792941 0.0132176531 -0.0166569498 -0.0031668856 0.0048190639 -0.0128650112 0.0285979405 -0.0068157101 -0.0132409915 0.0087917885 0.0242996266 -0.0279150706 -0.0096754786 0.0012708074 -0.0174993643 0.0109515519 0.0198545820 -0.0281554074 -0.0003644441 -0.0064857599 -0.0133741874 0.0144765238 -0.0553499745 0.0003736427 0.0388645685 0.0088430937 -0.0030175865 0.0756983810 -0.0313914327 0.0412718902 0.0445207858 -0.0660503312 0.0534982245 0.0073381587 -0.0130575746 0.0760824982 0.0533651636 -0.0085716310 -0.0044649163 0.0000866340 -0.0168472029 -0.0164531709 0.0098181844 -0.0083785823 -0.0166029470 0.0170296972 0.0087284952 -0.0141726470 0.0275278673 -0.0296595758 -0.0039688966 -0.0248886836 0.0220085836 -0.0284337601 0.0688181835 0.0326991894 -0.0287301725 0.0760258371 -0.0192741271 -0.0039404298 -0.0171476736 -0.0536550821 0.0061177537 -0.0669150211 0.0359938855 -0.0358463155 0.1009498829 0.0589871336 -0.0386537278 0.1173290455 0.0050882926 -0.0111969255 0.0182057183 0.0017504002 -0.0098046419 0.0167292796 0.0000845866 -0.0088648592 0.0167304380 0.0017563112 -0.0040053928 0.0033379531 0.0375313043 0.0051751638 0.0305214949 0.0077519578 0.0072803896 0.0177805787 0.0070904070 -0.0083926128 -0.0084531744 0.0271728555 -0.0045712860 0.0075149854 0.0258255752 0.0118538862 0.0306027379 0.0014278681 0.0117614393 0.0260528116 -0.0011888535 -0.0130319699 -0.0252630590 0.0354518154 -0.0101752068 0.0036871427 0.0320553268 0.0200652920 0.0460519568 0.0537723699 0.0074696132 0.0472046209 -0.0332521682 0.0066151918 -0.0535641556 -0.0340855818 0.0190726995 -0.0117531039 0.0426223577 -0.0571518705 0.0009803159 0.0156828715 0.0002081010 0.0060801905 -0.0229853966 0.0183465651 -0.0163352762 -0.0531606319 0.0570133123 -0.0211536995 -0.0278339558 0.0031682672 -0.0782731652 -0.0069526964 -0.0037178243 -0.1674240129 -0.0907055549 0.1131704427 -0.0381313526 0.1022779857 -0.1025940419 0.0211648169 -0.0448618167 -0.0075826027 -0.0423678022 -0.1044822545 -0.0082419102 -0.0476750368 -0.0413472005 -0.0122613439 -0.1641559048 0.0037459690 0.0214928693 -0.2314164509 0.0525026212 0.0101650548 -0.1286132853 -0.0889070745 0.1217281164 0.0496959904 -0.0914434695 0.1156793670 -0.0424366981 -0.1167547560 0.1766467361 -0.0841331731 0.1207596060 -0.0501322304 0.1584728259 0.1300113344 -0.1547298038 -0.0087845755 0.1630314334 -0.1903528208 -0.0043346159 -0.0437883721 -0.0064967271 -0.0290314507 -0.1402119773 -0.0071250744 -0.1347417316 -0.1734426727 -0.0148333583 0.0159893889 0.0010565968 -0.0116037374 -0.0194990461 0.0082913303 0.0092247775 -0.0335018034 0.0149889369 0.0250032033 -0.0378334684 0.0226067757 0.0226851085 -0.0335535224 0.0298677162 0.0275493409 -0.0432807195 0.0205307301 0.0096585185 -0.0365081831 0.0025621634 0.0057273354 -0.0301744800 0.0107589006 0.0293004976 -0.0353873445 0.0166375649 -0.0163984740 0.0108743997 0.0372814725 0.0327678656 -0.0458530102 0.0247509481 0.0047776815 -0.0387582988 0.0511709058 -0.0669296242 0.0075590287 0.0474321019 -0.0594110804 0.0100708880 0.0365745512 -0.0435248166 0.0061350410 0.0430030650 -0.0654118446 0.0071856945 0.0489321750 -0.0725876466 0.0058871772 0.0538118466 -0.0657869606 0.0068363153 0.0443396365 -0.0470779377 0.0095776462 -0.0044789804 0.0417983395 -0.0044580568 0.0353645970 -0.0582509048 0.0054282068 0.0498031034 -0.0763028290 0.0052286019 0.0280223579 -0.0357605455 0.0279466947 -0.0010056120 -0.0374764568 0.0369482555 -0.0637866834 0.1088539577 -0.0434908500 0.0154968392 0.0566297204 0.0219787699 -0.0129863626 0.0055581754 -0.0102924929 0.0049593409 -0.0009392263 -0.0217407749 -0.0236328767 0.0446307097 0.0095162745 -0.0062114529 0.0737417662 0.0123196470 -0.0476841447 0.0527518618 0.0276777648 -0.0111573418 0.1029103811 0.0352084533 0.0224537577 0.0241614910 -0.0381263688 0.0145295345 0.0612078552 -0.0172004308 0.0447386507 0.0168044141 -0.0543422690 0.0270813835 0.0797346847 -0.0204285411 0.0408305099 -0.0418738883 -0.0156143285 -0.0119096549 -0.0129039211 0.0194834344 0.0893904723 -0.0718646097 -0.0348891385 0.0362692436 -0.0531175359 -0.0022915441 0.1617833700 -0.1006443843 -0.0670102185 0.0693251828 -0.0701353760 -0.0215229699 -0.0858975335 0.0140454292 0.0650292552 -0.0698556910 -0.0007779939 0.0629119054 -0.1575702206 0.0466436215 0.0998176715 -0.1309828160 0.0254002548 0.1011201111 0.0467480817 -0.0320000487 0.0259679691 0.0827100245 -0.0643293531 0.0492490537 0.0270803710 -0.0634093972 -0.0031568728 0.0599436917 0.0059389480 0.0511069659 0.0258186299 0.0228999738 0.0133389335 0.0356858632 0.0496405254 0.0160352120 0.0047682109 0.0241500228 -0.0077606724 0.0413568739 0.0075538674 0.0313694821 -0.0034093289 0.0349641460 -0.0198218957 0.0068424156 0.0186161808 -0.0382657631 -0.0010964713 0.0238924465 -0.0258937225 -0.0113381722 0.0214372858 -0.0009507006 -0.0009162971 0.0387041723 -0.0032282414 -0.0266286868 0.0044047439 0.0072813619 -0.0267536457 0.0132882455 0.0039338776 -0.0394299509 0.0107413654 0.0104055961 -0.0193706053 -0.0102031933 -0.0053748331 -0.0337201136 0.0104640784 0.0120978884 -0.0237680104 0.0041113258 0.0095779312 0.0011016635 0.0417106741 0.0006484288 0.0149972267 0.0536757335 -0.0149562928 -0.0281202423 0.0898812502 -0.0455144237 0.0912050262 0.0571028084 -0.0293910401 0.1135456509 -0.0163567897 0.0789300110 -0.0719840781 -0.0112836773 -0.0449581148 -0.0490147162 -0.0008077256 -0.0394913694 0.0244845155 0.0135830617 -0.0033590231 0.0541905061 -0.0534964335 0.0704496778 -0.1235523182 0.0670638210 -0.1510258560 -0.0849465309 0.0750426760 -0.1273352446 0.0783075581 -0.0359632432 0.0687838270 0.1037519415 -0.1047673359 0.1420091596 -0.2004251119 0.1060938824 -0.2391740990 -0.1432769865 0.1257835160 -0.2071193244 0.0727247036 0.0072485330 0.0368286460 0.0624720652 0.0103467499 0.0241493495 0.0558403955 0.0194131805 -0.0024793493 0.0500866066 0.0041811462 0.0224922335 -0.0174899218 -0.0197465676 -0.0105581345 0.0486068904 -0.0241113091 0.0180193386 0.0198097897 0.0192668951 0.0105938073 -0.0150108980 0.0082505796 -0.0044701297 0.0143184271 -0.0366691551 0.0021240085 0.0729298170 -0.0375290316 0.0233788660 0.0158620769 0.0386501662 0.0040461297 -0.0398654597 0.0212522339 -0.0142102456 0.0126719360 -0.0593435203 -0.0025750540 -0.0446943594 -0.0280011401 -0.0256419924 0.1138915751 -0.0595912560 0.1191021892 0.1134702169 -0.0430976049 0.0339680756 0.0177909078 -0.0722205050 -0.0051489464 -0.0022008492 -0.0083719650 0.0193532033 0.0039385230 -0.0101036304 0.0241344326 0.0064058460 -0.0153191800 0.0366665468 0.0003681980 -0.0031958093 0.0303049399 -0.0503483667 -0.0304350590 0.0887905538 0.0288125243 -0.0474884028 0.0126987657 -0.0148208179 0.0646160606 -0.0339246792 -0.0031512210 0.0052461041 0.0070965315 -0.0150969978 0.0310390646 -0.0366733038 -0.0200586889 -0.0221608497 0.0880168510 -0.0559252485 -0.0761109533 0.1639037851 -0.1304809333 -0.0364506245 0.0464766424 0.0165472904 -0.0586369990 -0.0244494038 0.0260423077 -0.0295845183 0.0277733365 0.0666793188 -0.0768865918 0.0277587239 -0.0010671265 0.0594218125 -0.1058121265 -0.0121382897 0.0604113140 -0.0422780594 -0.0455908499 0.1323551395 -0.0108067007 0.0524358938 0.0054993655 -0.0523215423 -0.0407402721 0.0733572698 -0.1031961885 -0.0665545617 0.0349582664 0.0104891993 0.0006179974 0.0470664841 -0.0343531720 0.0035006074 0.0593112911 -0.0427208763 0.0003128242 0.0547641380 -0.0380956372 -0.0078612066 0.0399548675 -0.0262660878 -0.0031152405 0.0476345548 -0.0343248856 0.0000009916 0.0534307302 -0.0400899627 0.0050721939 0.0646807221 -0.0482254034 0.0020223174 0.0541932729 -0.0395985003 -0.0177931132 0.0033131182 0.0033425205 -0.0026787087 0.0434257132 -0.0298936380 -0.0004531445 0.0571119072 -0.0410392436 0.0395454578 -0.1181160665 0.0089544794 0.0486361875 -0.1440572245 0.0246395184 0.0325917988 -0.1400107849 0.0242408289 0.0363856326 -0.1533010016 0.0243537397 0.0257348268 -0.1170459258 0.0079276365 0.0362147120 -0.1129378162 0.0074451869 0.0524395705 -0.1369949317 0.0315664093 -0.0256176724 -0.0346938258 0.0122866005 0.0350237127 -0.1599210056 0.0259017280 0.0139252321 -0.1089065827 -0.0037602501 -0.0170181069 -0.0125133506 0.0142269875 -0.0253661990 -0.0146932378 0.0181520869 -0.0773497810 -0.0354095053 0.0118702379 -0.0215230087 0.0666342968 0.0047697457 -0.0064981759 0.0183314539 -0.0133417752 -0.0096324492 0.0192571033 -0.0062669207 -0.0061685458 0.0195718787 -0.0100341617 -0.0044355326 0.0242976230 -0.0000543385 -0.0078408439 0.0181576459 -0.0136678109 -0.0032349930 0.0255443373 0.0052489673 -0.0077683766 0.0232014477 -0.0035140481 -0.0063268008 0.0257432670 0.0025770879 -0.0064999770 0.0235478334 -0.0022775841 -0.0058189635 0.0271606053 0.0094989850 -0.0220412973 0.0042843634 0.0014545085 -0.0482808536 0.0153542589 0.0137776155 0.0270227756 -0.0267498698 -0.0182083234 0.0415402060 -0.0452977058 -0.0297049832 0.0610978789 -0.0371778433 -0.0267979402 0.0885512940 -0.0716847824 -0.0535825836 -0.0569908452 0.0075617217 0.0162367468 -0.0086155539 -0.0244021434 -0.0062680485 -0.0920967591 0.0209515358 0.0283465140 -0.0060351985 -0.0336726893 -0.0097887279 -0.0287491259 0.0156596696 -0.0112837753 -0.0448813779 0.0470152389 -0.0350016114 -0.0157244458 0.0362140674 0.0055316462 -0.0439653213 -0.0189571628 -0.0336997799 -0.0151944317 -0.0432704422 0.0205230651 -0.0500974744 -0.1197543039 0.0158646761 0.0261636640 -0.0409235674 0.0695541436 -0.0427126557 -0.0023070175 -0.0309078317 -0.0121339154 0.0203361932 -0.0505668810 0.0248256694 0.0254895031 0.0183259479 0.0056105104 0.0233564802 0.0103441992 -0.0395927728 0.0420286795 0.0347774013 -0.0358127445 0.0276844701 -0.0288042263 0.0174093997 0.0391758561 -0.0086737279 -0.0212036431 0.0482301714 0.0420862247 -0.0588392777 0.0506379964 0.0150130610 0.0243639688 0.0266781416 -0.0351103911 -0.0881324409 0.0535788413 0.0077406709 0.0574789672 0.0425861839 -0.0336235554 -0.0466182261 0.0296622595 -0.0771472715 0.0000533141 -0.0295682371 -0.0391150447 0.0633056338 -0.0834190588 0.0063838777 -0.0598863568 -0.0538757845 -0.0350251179 -0.0713320065 0.0050921222 -0.0551850467 0.0698398349 0.0007006264 0.0481846131 0.0436531361 -0.0018066788 0.0289434143 -0.0241146482 -0.0074887409 -0.0170437525 -0.0131782653 0.0262468745 -0.0220654052 0.0654342183 -0.0336824246 0.0572429705 0.0310283169 -0.0376360961 0.0325720612 -0.0439515442 0.0193548661 -0.0394667297 -0.0277648165 0.0520424390 -0.0379102440 0.1061743981 -0.0534575407 0.0947019279 0.0502713012 -0.0629600598 0.0553443438 -0.0510171171 -0.0069658598 -0.0351148725 -0.0357810993 -0.0119652928 -0.0165659446 -0.0344252954 -0.0149630619 -0.0014714294 -0.0267751975 -0.0071943897 -0.0147003155 0.0060519157 0.0097698142 -0.0144067176 -0.0219870768 0.0088930287 -0.0034732668 -0.0137467394 -0.0149311218 -0.0218848921 0.0018564156 -0.0067279744 -0.0240144303 -0.0050003587 0.0174857568 -0.0022621288 -0.0323771546 0.0156580794 0.0040912906 -0.0130734582 -0.0264587417 -0.0225631515 0.0103231720 -0.0126821829 -0.0299849806 -0.0014544679 0.0300738002 0.0067450841 0.0186956660 0.0163497245 -0.0153181137 -0.0696825537 0.0340132890 -0.0645366378 -0.0703461643 0.0278330018 -0.0384957456 0.0699957821 -0.0061073071 -0.0554012270 -0.0128538859 0.0112908492 -0.0158342739 0.0051123677 -0.0007635969 0.0014196493 0.0251705732 -0.0297687397 0.0163842694 0.0149761882 -0.0065326607 0.0482047681 0.0104461101 -0.0016001046 0.0830402991 0.0334777375 -0.0598980718 0.0238533823 -0.0640563776 0.0233880726 0.0206835299 0.0154028088 0.0134399647 0.0113473182 0.0561821507 0.0020834728 0.0352739335 0.0494741113 0.0219059593 0.0717759503 -0.0054376714 -0.0104144438 0.1430434427 -0.0283938062 -0.0291583717 0.0440512972 0.0396279916 -0.0581097826 -0.0119778571 0.0346850701 -0.0764606521 -0.0060509663 0.0122051146 -0.0917499247 0.0554859723 -0.0703453166 0.0018243703 -0.0403919315 -0.0788013032 0.0469692096 0.0654981379 -0.1113990494 0.0421682070 0.0186119631 0.0252154174 0.0110164668 0.0382518211 0.0771265133 -0.0005062430 0.0864163718 0.0965421367 -0.0118976629 -0.0017049214 -0.0129679000 0.0237124899 -0.0709287480 -0.0114036375 0.0713254688 -0.0935562758 -0.0134473165 0.0750445010 -0.0698621163 -0.0214829094 0.0206955424 -0.0178335135 -0.0240615400 -0.0299781883 0.0085680508 -0.0238265553 -0.0252793046 -0.0206470505 -0.0126530226 0.1036992846 -0.1318671674 -0.0105849948 0.1131690220 -0.0914047152 -0.0211844588 0.0183040839 0.0155532428 -0.0275369519 -0.0742289034 0.0509792293 -0.0290261304 -0.0671168752 0.0013970586 0.0911577100 -0.0023831435 -0.0338855760 0.0912422801 -0.0037026836 -0.0074982136 0.0751538001 -0.0106128021 -0.0028855910 0.0692163991 -0.0446903030 -0.0191502261 0.0760171517 -0.0374751084 -0.0437917153 0.1018380948 0.0235824026 -0.0445797166 0.0936970040 0.0153076911 -0.0003499002 0.0311628473 0.0576512345 0.0331784202 0.0520030739 -0.0596889792 -0.0125288632 0.0717507864 -0.0474794169 -0.0520287839 0.0027998451 0.0239688256 0.0187923430 -0.0432409008 0.0122732565 0.0390836006 -0.0525499966 0.0947922756 0.0101694035 0.0698102517 0.0851655681 0.0848475418 -0.0011638589 0.0145962697 0.0465044807 -0.0364316567 0.0125634550 0.0304440197 0.0245354050 -0.0228955408 0.0750521462 -0.0086237962 -0.0808003177 0.0408251358 0.0719773423 -0.0114480768 0.1073746199 0.0070520724 -0.1097239796 0.0502731941 -0.0765486882 -0.0536676151 -0.0152862097 -0.0601240130 -0.1029465608 -0.0225369679 -0.1257032971 -0.0666176749 -0.0562665313 -0.0896654284 -0.1523411467 -0.0736548390 -0.0122399708 0.0223839649 0.0399839940 -0.0796780461 0.0421026294 0.0523085191 0.1070539962 -0.0642051450 0.0114077860 0.1230430550 -0.1242251617 -0.0081233429 0.2088282783 -0.0879550422 -0.0008836230 0.2370144426 -0.1969308848 -0.0516521942 -0.1245937400 0.0074202789 0.0680027736 -0.0163240077 -0.0766537809 0.0380095862 -0.2217102094 0.0348219100 0.0831012706 -0.0278945562 -0.1076496673 0.0370945846 -0.0200005735 0.0196104464 -0.0118584755 -0.0283344395 0.0176150868 -0.0097238067 -0.0154279184 0.0290974033 -0.0116339201 -0.0249735825 0.0202628160 -0.0105697777 -0.0088925043 0.0078104601 -0.0071376701 -0.0077446261 0.0216323517 -0.0020175782 -0.0087412298 0.0037213568 -0.0126210290 -0.0018540060 -0.0012300024 0.0043388940 0.0404727708 0.0393391802 0.0523896310 0.0220433563 0.0299521188 0.0061304192 0.0278386091 0.0296820842 0.0058820242 0.0287841697 0.0112350627 0.0020227267 0.0309781114 0.0092483267 -0.0207774504 -0.0335306629 0.0050692194 0.0064900410 -0.0201948753 0.0067426957 0.0008699771 -0.0471006092 0.0232758329 0.0304600082 -0.0498653021 0.0141952963 0.0296816237 -0.0398518873 0.0226680656 0.0323108525 -0.0108129186 -0.0231659594 -0.0154233273 0.0178956361 0.0069786381 -0.0876340963 -0.0050006655 -0.0045748418 -0.0646146277 -0.0078218517 0.0392016498 -0.0358028105 -0.0226092258 -0.0431226764 -0.0728853766 -0.1077775135 0.0083712766 -0.0529175092 0.0803035105 -0.0004195056 0.0711189372 0.0469586967 -0.0024171615 0.0449027067 -0.0379759919 -0.0051580979 -0.0173463182 -0.0202036314 0.0305434338 -0.0141664912 0.0679144945 -0.0369425852 0.0702389103 0.0263478117 -0.0403756675 0.0379292786 -0.0589942381 0.0249403357 -0.0412161693 -0.0350034436 0.0596845601 -0.0291758043 0.1137692018 -0.0590307458 0.1119317514 0.0467467018 -0.0690433459 0.0612673169 -0.0772528918 -0.0104432537 -0.0357786702 -0.0559241283 -0.0259958980 -0.0079351377 -0.0505763532 -0.0330667314 0.0127150398 -0.0455741611 -0.0205785835 -0.0046480062 0.0166975734 0.0103129896 -0.0008399712 -0.0416566747 0.0099046001 0.0047332128 -0.0183543781 -0.0359371736 -0.0080402823 0.0130080287 -0.0209205880 -0.0097834583 -0.0094416745 0.0261928539 0.0076333988 -0.0637181392 0.0232708129 0.0109729071 -0.0154620573 -0.0576012161 -0.0047874541 0.0344007917 -0.0340186402 -0.0157906964 -0.0062961252 0.0511278023 0.0161341134 0.0406677974 0.0217551597 0.0003767163 -0.0854139941 0.0432566241 -0.0801091824 -0.0929816711 0.0376067517 -0.0671763922 -0.0169965010 -0.0471600177 0.0434281558 -0.0075452817 0.0088708609 -0.0090048632 0.0011713894 0.0036496300 0.0008059141 0.0131836186 -0.0159116930 0.0181798645 0.0089960747 -0.0037468320 0.0254459268 0.0090442196 0.0001736635 0.0443356070 0.0171642698 -0.0382337108 0.0121689734 -0.0286380381 0.0310490796 -0.0070126729 0.0035803975 0.0134608685 -0.0002698318 0.0246034901 0.0070571445 0.0133309486 0.0288938999 0.0157078814 0.0358767696 0.0004736938 -0.0035766391 0.0753107667 -0.0083158399 -0.0181860687 0.0222969965 0.0185067083 -0.0390016588 -0.0099284660 0.0181265880 -0.0424074901 0.0093722378 0.0191070890 -0.0578921291 0.0281551991 -0.0421292586 0.0082330210 -0.0465016846 -0.0405852905 0.0554228740 -0.0082462204 -0.0357808408 0.0603993656 0.0044316074 0.0188541209 0.0113946051 0.0171459224 0.0319644742 0.0103821937 0.0308300132 0.0386825627 -0.0050669254 0.0004992934 0.0418231879 0.0351056528 0.0925759067 0.0494912622 -0.0223441258 0.1114616265 0.0444642498 -0.0477823594 0.0893520277 0.0308174249 -0.0138997109 0.0502278614 0.0140340291 0.0290727890 0.0475780203 0.0271686070 0.0513869432 0.0700482064 0.0641358942 -0.0448713515 0.1405329695 0.0509546637 -0.0837047971 0.1000848491 0.0258032923 -0.0162464612 -0.0218555676 -0.0040362262 0.0516255635 0.0188439680 0.0219734585 0.0879064986 0.0604749727 0.0023684003 -0.1192662301 0.0481065367 0.0173612527 -0.1445421128 0.0405243530 0.0139961121 -0.1102162767 0.0286711480 0.0265082383 -0.1048482258 0.0441388685 0.0077008865 -0.0758106388 0.0509438871 -0.0100877494 -0.1342125635 0.0545937652 0.0160755231 -0.1548700022 0.0368633444 -0.0351064380 0.0182168033 -0.0304225437 0.0365448497 -0.0906147791 0.0381758233 0.0022127505 -0.0526094206 0.0516397950 -0.0285144308 -0.0110116431 -0.0419771075 0.0744541690 -0.0207955756 -0.0660442632 -0.0807339623 0.1011755836 -0.0785283602 -0.0404616484 0.0692236601 -0.0442604268 0.0212813360 0.0151334453 -0.0405842969 0.0416033308 0.0423631019 0.0385485919 -0.0120461665 -0.0009800256 -0.1629926898 0.0121732292 0.0437010685 -0.1261618130 -0.0606545032 -0.0450937392 -0.2764416497 -0.0115354023 0.0255207410 -0.2201874793 0.0818985425 0.1119410863 0.1268023366 0.0619552343 0.1156008632 0.0634687856 0.1348018652 0.1488130556 0.2302042015 0.0845929100 0.1571131159 0.1410644982 -0.0412890003 0.0146831936 0.0152098762 -0.0313934215 0.0130783782 0.0142733284 -0.0486056468 0.0173314637 0.0224313469 0.0011528394 -0.0072011346 -0.0091237152 -0.0815258502 0.0341197100 0.0456421183 0.0052217239 -0.0089635849 -0.0120419748 0.0199640165 -0.0148686043 -0.0194719553 0.0505471169 -0.0314141736 -0.0395484434 0.0424034124 -0.0272554734 -0.0345397003 0.1025586996 -0.0575426997 -0.0730045427 -0.0021595801 0.0055440472 0.0137440218 -0.0007545056 -0.0138267489 0.0287316676 -0.0045855345 0.0036936223 0.0047135041 0.0020489972 0.0263366254 0.0280791888 -0.0040211336 0.0109696213 -0.0084736468 0.0014172062 0.0186815160 -0.0085061647 -0.0085753395 0.0105116454 -0.0144771933 0.0010397639 0.0050719426 -0.0012501239 -0.0132378127 -0.0165973737 -0.0058864832 -0.0481435087 0.0688305242 0.1366885505 -0.0257868660 0.0524674732 0.0974635239 -0.0011228950 0.0024267334 0.0218946575 -0.0112331445 -0.0209812010 -0.0159960468 -0.0120458982 -0.0135494288 0.0354701745 -0.0004920083 -0.0102197382 0.0197391460 0.0341588057 -0.0459480369 0.0070624594 -0.0172195936 -0.0126029192 0.0460385029 0.0528405148 -0.0562815984 -0.0023452164 -0.0067245906 -0.0365433909 0.0277134553 -0.0167329046 -0.0197291600 -0.0442010317 -0.0148069740 -0.0451711086 -0.0111122288 -0.0087361684 -0.0302478929 0.0082537485 -0.0143296691 -0.0714419995 -0.0186797838 -0.0228826716 0.0025257858 -0.0135816280 0.0237006052 0.0038397863 0.0155964075 0.0144728293 0.0025912081 0.0093753875 -0.0084614649 -0.0006206829 -0.0039614426 0.0003351093 0.0090284881 0.0015937074 0.0163084459 -0.0055775946 0.0095073786 0.0047792635 -0.0075855665 0.0025834386 -0.0107816462 0.0066258531 -0.0046858756 -0.0000177896 0.0156582041 0.0042723990 0.0259486664 -0.0101011971 0.0143775334 0.0064162609 -0.0142437849 0.0026205034 -0.0164006967 -0.0014561931 -0.0079137897 -0.0088502140 -0.0046226201 0.0012824310 -0.0079403426 -0.0059238900 0.0066015154 -0.0077762823 -0.0033798258 0.0012131785 -0.0032401825 0.0032478300 -0.0099810170 -0.0031971984 0.0000377846 0.0122795730 -0.0092696756 -0.0039784392 -0.0127081617 -0.0072484280 -0.0007048499 -0.0192058507 -0.0005450834 0.0033258905 0.0073059670 -0.0021214430 0.0006211148 0.0243122653 -0.0114915300 -0.0043261244 -0.0181462547 -0.0045816596 -0.0039349407 -0.0299690568 0.0030776853 0.0058923215 0.0162578256 -0.0019152356 0.0055893767 -0.0147094331 -0.0162418205 0.0095794415 -0.0082326467 -0.0171630088 0.0009250202 -0.0094757757 -0.0357834608 -0.0035586240 0.0649536722 -0.0007240646 0.0016035499 -0.0033427012 0.0031381946 -0.0067373340 0.0087944749 0.0127568950 -0.0223990778 0.0355394032 0.0093585251 -0.0073512873 0.0287723457 -0.0018346719 -0.0105078512 0.0555655427 0.0192955860 -0.0302671740 0.0125605605 -0.0169486990 0.0049942696 0.0176335941 -0.0024156557 -0.0017479264 -0.0023296104 -0.0044191971 -0.0026781679 -0.0014489718 0.0150984651 -0.0080417646 0.0562292085 -0.0074597632 -0.0223863660 0.0879226878 -0.0323135264 -0.0137295190 0.0388025797 0.0352570100 -0.0189488246 -0.0003762467 0.0240027410 -0.0539304462 -0.0133172652 -0.0056724256 -0.0431818595 0.0295283066 -0.0031950285 0.0098507433 -0.0142183179 -0.0151213782 -0.0031978725 0.0495583561 -0.0565270965 0.0134572846 0.0126319566 0.0274375681 -0.0035934683 0.0050545601 -0.0157881009 0.0120684574 -0.0305099979 -0.0273509562 -0.0160263457 0.0198341413 0.0190965307 -0.0008048525 -0.0743525703 0.0643386716 0.0963163719 -0.1539025808 0.0859002243 0.1485433471 -0.1676198889 0.0817303464 0.0740901854 -0.0949625694 0.0680811983 0.0169187771 -0.0553208340 0.0446200851 -0.0181457831 -0.0512318789 0.0683179734 0.1260284536 -0.1875799970 0.0915758089 0.2190499870 -0.2072080156 0.0713708100 -0.0113844096 0.0131042997 0.0594316998 -0.0288539357 -0.0140939381 0.0378957899 -0.0899135890 -0.0159008211 -0.0437958491 -0.0198641172 0.0541800189 -0.0416336235 -0.0194888761 0.0333349935 -0.0281651850 -0.0024588422 0.0257069814 -0.0184289776 0.0130431838 0.0420697579 -0.0257952300 0.0082605315 0.0614608756 -0.0525050815 -0.0379719123 0.0616806874 -0.0469117041 -0.0319670660 0.0243404878 -0.0103398806 -0.0046125280 -0.0230600464 -0.0055325739 0.0260906435 0.0367600454 -0.0197402703 0.0170140180 0.0712909785 0.1077820894 -0.0529806862 0.0524863287 0.0249139644 -0.0591115500 0.0784327368 0.0328905650 0.0152388915 -0.0333606514 -0.0375724622 -0.0240325533 -0.0593646355 -0.0200107608 0.0792817724 0.0972219840 -0.0038743553 0.0505941637 0.0362813897 -0.0548507251 0.1224203414 0.0578344831 -0.0549822985 0.1029971864 -0.1147781479 -0.0950992707 0.1506964206 0.1246718293 -0.0804932302 0.1080529418 -0.1841492617 0.0082953487 0.0615547883 -0.0798620248 -0.0303039964 0.0728477943 -0.1909623016 0.0415310616 0.0483610885 -0.1068103331 -0.0324421749 0.0566877351 -0.3210670573 0.0012230000 -0.0221713585 0.0217239116 0.0477018278 -0.0510431719 -0.0077773947 -0.0667171576 0.0053585330 0.0709199587 -0.0926380256 0.0109995924 0.0877182970 -0.1117974449 0.0292553906 0.1009857210 -0.1660717943 0.0448858432 0.1371386237 0.0689001527 -0.0699473732 -0.0236839238 -0.0073432602 -0.0326407150 0.0307500178 0.1247066553 -0.1036982341 -0.0666479237 -0.0072793780 -0.0357626261 0.0300249217 -0.0061241355 0.0051884368 -0.0140665821 -0.0081977694 0.0132930382 -0.0202128051 -0.0040848082 0.0083074283 -0.0110842251 -0.0104904403 -0.0039178373 -0.0198888098 -0.0002558165 -0.0033171987 0.0033708174 -0.0059241361 -0.0061927026 0.0063715946 0.0069552415 -0.0064838447 0.0073692657 0.0001995356 -0.0020342101 0.0014477267 -0.0178561582 0.0237255908 0.0487643889 -0.0154907722 -0.0208735614 -0.0364233778 -0.0164575328 -0.0126575765 -0.0152720074 -0.0245207730 0.0110879227 -0.0004745060 -0.0287982900 0.0163354532 0.0354685170 0.0328880571 -0.0215585394 -0.0384102947 -0.0222956090 0.0105533421 -0.0062943808 -0.0721187740 0.0603812806 0.0256118203 -0.0291436873 0.0045878834 -0.0188120985 -0.0903723899 0.0828368601 0.0555317197 0.0931152453 0.0051101290 -0.0683587077 -0.0123084196 -0.0215599343 0.0476189686 0.0446784223 -0.0812152334 0.0745309497 0.1833698290 -0.2418753415 0.1385992412 -0.0724760471 -0.0152535849 0.1173483513 0.0792812922 -0.0056098027 0.0085147419 -0.0605378458 0.0028033604 -0.0688332093 -0.0273137455 -0.0025818088 -0.0327114520 0.0427035751 -0.0136806146 0.0348182911 -0.0079501289 -0.0104299712 -0.0311865071 -0.0004603130 -0.0041084739 0.0170748333 0.0337582748 -0.0095046315 0.0530084097 0.0293892854 -0.0183462403 0.0127321064 -0.0259762880 -0.0122504724 -0.0662927567 -0.0091034758 -0.0004866692 0.0231523848 0.0516122565 -0.0098180013 0.0836335371 0.0642402744 0.0053974211 0.0210595881 0.0371190025 0.0285906238 -0.0160569161 0.0340468851 0.0332190603 -0.0336965400 0.0251848629 0.0245464953 -0.0257249746 -0.0117325132 -0.0120439926 0.0231053770 0.0236238692 -0.0045007483 -0.0292857893 0.0030818260 0.0379610996 -0.0139676939 -0.0163121644 0.0199699556 0.0125007231 0.0052921449 -0.0243217326 -0.0026906506 0.0379417555 -0.0144941592 -0.0485782493 -0.0031997925 0.0610302582 -0.0252294944 -0.0313159031 0.0301352250 0.0252218334 0.0063610553 -0.0494333484 -0.0009794319 -0.0235428330 -0.0263518354 0.0477521131 0.0349730452 -0.0256328534 0.0383515336 0.0480621789 -0.0296704232 0.0772540628 -0.0258455298 -0.0165122943 -0.0298983440 -0.0051834247 0.0111853584 -0.0113270033 -0.0122900134 0.0115632906 -0.0159807509 -0.0150406380 0.0181311020 -0.0146455635 -0.0055311880 0.0000840481 -0.0258043046 0.0303789755 0.0237234115 -0.0559770767 -0.0023487943 0.0375272572 -0.0148483533 0.0155447854 -0.0692355932 0.0392787568 -0.0176490673 -0.0037763182 -0.0183535269 -0.0253418016 -0.0374034978 0.0350169611 0.0004135455 -0.0175639958 -0.0321522915 0.0400869673 0.0691249168 -0.1433020648 0.1023362113 0.0625028056 0.0069591005 0.0031333765 0.0428001218 -0.0025367174 -0.0001965950 0.0321376516 -0.0133387525 -0.0158720284 0.0619542480 -0.0331397078 0.0385586140 -0.0334505000 0.0948681735 0.0298874080 -0.1052281364 0.0869753364 -0.0048817931 -0.1396468831 0.0036660171 -0.0589719028 -0.0048116958 0.0682190038 -0.0164102315 -0.0764486398 0.0607364966 -0.0069466789 -0.0576355875 0.0186360140 0.0161465920 0.0775711133 0.0322983397 0.0575219958 0.1237695390 -0.0230235122 0.0700316302 0.1494588527 -0.0670754517 0.0366701764 0.1142965756 -0.0447697544 0.0161464268 0.1112207886 -0.0201397094 0.0118600610 0.0964221700 0.0140933654 0.0692798188 0.1255251734 -0.0220479740 0.0894772067 0.1665996652 -0.0956370104 0.0015753677 -0.0105038380 -0.0041512273 -0.0034778032 0.0965527999 -0.0125612703 -0.0072062551 0.0825985137 0.0386362383 -0.0327191554 -0.0234494199 -0.0356636371 -0.0316925312 -0.0306891384 -0.0296966432 -0.0406211749 -0.0474098110 -0.0254046139 -0.0306020773 -0.0585448396 -0.0179052363 -0.0293792338 -0.0471169331 -0.0220797158 -0.0466616078 -0.0098814574 -0.0395615327 -0.0299836549 -0.0181560306 -0.0238480195 -0.0590867223 -0.0309997648 -0.0180139646 -0.0216503101 -0.0693359240 -0.0157399641 -0.0318627105 -0.0609101628 -0.0297735573 -0.0380830794 -0.0601811506 0.0177636960 0.0120141296 -0.0875853938 0.0197258559 -0.0848473457 -0.0274810371 -0.0209385479 -0.0517177995 -0.0158440420 -0.0084762465 -0.0223872590 -0.0222985419 -0.0405201387 -0.0239232361 -0.0019601026 0.0027189553 -0.0234279098 -0.0422313943 -0.0699078149 -0.0174969539 -0.0214251783 0.0081137330 -0.0253696893 -0.0674240647 -0.1324019109 -0.0148743912 -0.0312818268 0.0033164514 -0.0176063752 0.0147160439 0.0778580533 -0.0108046809 0.0137795795 0.1018620293 -0.0134523043 0.0320304616 0.1219418764 -0.0014769396 0.0354955854 0.1791639403 -0.0591641510 0.0544090226 0.0072233752 -0.0583620237 0.0610875111 0.0133120404 -0.0514920095 0.0715185057 -0.0304819304 0.0475501955 0.0538517706 -0.0894796088 -0.0981364055 0.0774937664 -0.0329067669 0.0852460033 0.0433968242 -0.1263269998 0.0224265331 0.0584434951 -0.0296400441 0.0960909263 0.0377272898 -0.1032248140 0.0544026469 0.0596900525 -0.0150622503 0.1836486824 0.0121049406 -0.1552948174 -0.0288976866 0.0326126155 -0.0453192763 0.0212991077 -0.0019972317 -0.0210617890 -0.0308366865 0.0530306218 -0.1335235216 -0.1048341639 0.0683396457 -0.0054641233 0.0022918643 0.0045739587 0.0195187559 -0.0025295260 0.0358534138 0.0345643801 0.0023295317 -0.0054140084 0.0060620370 0.0175619100 -0.0135794618 0.0415636004 0.0378570650 0.0312647846 -0.0764871529 0.0622677747 0.0699451682 0.0337385811 0.0491961509 0.0632688176 0.0149298142 0.0237274683 0.0420039105 0.0037588367 0.0406491230 0.0416463194 -0.0529317815 -0.0060101358 0.0384441392 0.0109276127 -0.0156340808 0.0478806219 0.0215251941 -0.0394468709 0.0324148033 -0.0005652217 -0.0444922389 0.0413504570 0.0049926285 -0.0312643153 0.0252337516 -0.0091314964 0.0290694690 0.0372911939 -0.0063681084 0.0323196953 0.0682698737 -0.0606372418 0.0249511155 0.0172003467 0.0342743003 0.0897277815 0.0419094464 0.1317176475 -0.0417742730 -0.0639271935 0.0207476544 0.0568327446 -0.0117443585 0.0248059336 -0.0367089513 0.0163331986 -0.0609950902 -0.0143284642 0.0074533873 -0.0294501618 0.0306706427 -0.0127940877 0.0322708616 0.0043111085 -0.0018126647 -0.0082382853 -0.0018955779 0.0041525864 -0.0072326405 0.0211746635 -0.0070664057 0.0275233297 0.0260716855 -0.0134269139 0.0271051215 -0.0035978559 -0.0003191891 -0.0222574555 -0.0109397752 0.0090066688 -0.0177135600 0.0295042832 -0.0103002876 0.0406982799 0.0414622248 -0.0016572506 0.0222853097 0.0163136495 0.0163042818 -0.0106364125 0.0144167768 0.0189725045 -0.0233574152 0.0069055669 0.0169575508 -0.0250897222 -0.0035457781 -0.0059960829 0.0274967526 0.0045998067 0.0021981098 -0.0305723181 -0.0032245322 0.0245625937 -0.0122465676 -0.0078591916 0.0126087024 0.0169962239 -0.0005445287 -0.0106436298 -0.0032085318 0.0090406339 -0.0021086138 -0.0490095503 -0.0074723430 0.0364736711 -0.0201018644 -0.0156925460 0.0197608491 0.0333621625 0.0000305490 -0.0247027711 -0.0023965395 -0.0042188611 -0.0159400547 0.0552948199 0.0302219508 -0.0195044792 0.0539083597 0.0373799830 -0.0295016708 0.0462031815 -0.0293177954 0.0047825609 0.0046207505 0.0022016048 0.0086307624 -0.0066556183 -0.0111584684 0.0240316424 -0.0310930775 -0.0241715288 0.0450551650 -0.0565000789 -0.0064695942 0.0017347710 -0.0468185957 0.0443200151 0.0457701645 -0.0492566080 -0.0250427119 0.0263482637 -0.0331987976 0.0290352586 -0.0696010514 0.0203389128 -0.0139534208 0.0090265921 -0.0294310934 -0.0124272162 -0.0286776047 0.0321124577 -0.0429117699 -0.0625178580 0.0122078201 0.0760879022 0.1260426460 -0.2493693226 0.1855359185 0.1541879877 0.0979253098 -0.0321375069 0.0217935326 -0.0122675293 -0.0278863775 0.0324773347 -0.0342795981 -0.0286172103 0.0385925865 -0.0419931058 0.1276860771 0.0279456588 0.0378405537 0.0793492286 -0.1871051173 0.1309871429 -0.0846017950 -0.1276634754 -0.0302979420 -0.0817222708 0.0092808384 0.0635891035 0.0112154742 -0.0842485742 0.0951893177 0.0351895111 -0.0420261334 -0.0112585565 -0.0067469765 -0.0350783869 -0.0676559814 -0.0468991250 -0.0715820179 -0.0197433777 -0.0698724700 -0.1142649694 0.0392071118 -0.0538813090 -0.1132743403 0.0458663975 -0.0429493257 -0.1357056208 0.0426801253 -0.0287750994 -0.0963661834 -0.0117071198 -0.0510017847 -0.0512260860 -0.0436325707 -0.0823247658 -0.1217863727 0.0553901508 -0.0202831465 0.0127389322 0.0150837565 -0.0377158474 -0.1567762297 0.0649234010 -0.0193422094 -0.0998374258 -0.0198210611 -0.0189957096 -0.0411207643 0.0072988476 0.0011942082 -0.0838049297 0.0143825124 0.0032472950 -0.0931223196 0.0152908840 0.0125092200 -0.0918178282 0.0257055415 -0.0099300916 -0.0428888170 0.0182000533 -0.0365924623 -0.0310962778 0.0051229781 0.0030638766 -0.0857293888 0.0166881460 -0.0315091979 -0.0197205579 -0.0136851629 0.0279259464 -0.1038578852 0.0277305748 -0.0163775913 -0.0338476393 0.0130642435 0.0295697618 0.0695758366 -0.0086504949 -0.0388647869 0.0906820878 -0.0011719701 -0.0647166107 0.0173999613 -0.0352772071 -0.0336170822 0.0263555384 -0.0221483671 0.0505871405 0.0625305383 0.0588581836 0.0320772376 0.0422511023 0.0176745413 0.0636434297 0.0496734826 0.0767352854 0.0368541450 -0.0096162875 -0.0336976787 0.0903134008 0.0741566254 0.1393467530 0.0382024945 -0.0298269015 -0.0559247289 0.0078476162 -0.0013893486 -0.0584954192 0.0055554782 -0.0412256619 -0.1207204106 -0.0207932732 -0.0128921559 -0.0888385718 -0.0199118914 -0.0892410649 -0.2183429840 -0.0435110255 0.0441416949 0.0346400357 -0.0245146692 0.0180059385 -0.0030529370 -0.0725914776 0.0444681227 0.0726493024 -0.0423164173 -0.0013253055 0.0480392845 -0.1095710235 0.0719911893 0.1125428059 -0.0623310675 -0.0036824517 0.0804392422 0.0329607458 -0.0416720523 -0.0484298951 0.0340676452 -0.0548011251 -0.0291337621 0.0778654510 -0.0775007019 -0.0996301472 0.0853840555 -0.1022459206 -0.0670254270 0.0013590526 0.0115517661 -0.0001671520 0.0556726430 -0.0473576303 0.0424898759 -0.0098039115 0.0140551529 -0.0889617743 -0.0480241511 0.0757903992 0.0556900884 0.0097169141 0.0108779628 0.0128670526 0.0062640449 0.0345335509 0.0246665356 0.0060003841 0.0071028375 0.0037367373 0.0235370906 -0.0034453148 0.0295022215 -0.0034991672 -0.0027655961 0.0057875081 -0.0043968895 -0.0089066673 -0.0083325918 -0.0038316296 -0.0072486717 -0.0039673311 0.0000866546 -0.0041855662 -0.0002238531 -0.0007967374 -0.0018166138 0.0092890595 -0.0010980037 -0.0029145235 -0.0001646916 0.0025733952 -0.0054083612 -0.0025155560 0.0058556360 -0.0047327008 -0.0012770366 0.0024422873 -0.0034110727 0.0008707440 0.0061090354 -0.0046843165 -0.0010784784 -0.0050568490 -0.0009351127 0.0022967725 0.0021437541 -0.0054926910 0.0168158366 0.0007311805 0.0086728119 -0.0032754597 -0.0129487449 0.0049683610 -0.0233074694 0.0146207745 0.0278356462 0.0001816084 -0.0100644284 -0.0001495898 -0.0035420823 -0.0048367772 0.0030856292 -0.0094371263 -0.0035074249 0.0009825695 -0.0054006579 -0.0026893068 -0.0021446306 0.0003440270 -0.0040889699 0.0011877637 -0.0034297393 -0.0003413807 -0.0020974265 -0.0008194539 0.0002286843 -0.0037950672 0.0020477100 -0.0021059830 -0.0010485929 0.0010293796 -0.0056763018 0.0031437357 -0.0057891623 0.0011568406 -0.0027953880 -0.0003785667 0.0017876047 -0.0055583436 0.0041136234 -0.0084879068 -0.0013662328 -0.0040542329 -0.0097496685 -0.0005347772 -0.0054221442 -0.0061498856 -0.0042693334 0.0005984012 -0.0106321334 -0.0000433112 -0.0076475864 0.0016927094 0.0031819122 0.0021893399 -0.0110434359 0.0045904871 -0.0082552464 -0.0058643398 -0.0023575964 -0.0049034422 0.0008927584 -0.0010870253 0.0003046732 -0.0046800646 0.0063480871 -0.0033900611 -0.0159067264 0.0070938371 -0.0111570991 -0.0058400775 -0.0056212752 -0.0054676219 0.0054569687 -0.0033683518 0.0034076620 -0.0047770127 0.0099888390 -0.0034585025 0.0071254570 0.0041127369 0.0072983399 -0.0009911313 -0.0012863890 0.0030308991 -0.0024380661 0.0037248007 -0.0005219637 0.0008226086 -0.0015965785 0.0033858447 0.0035924175 0.0115699411 0.0045846819 -0.0014972960 0.0119301461 0.0029218748 -0.0002391612 0.0090822134 0.0109781805 0.0091413358 -0.0113207967 -0.0045760474 0.0399326921 0.0135488157 0.0020941336 0.0240087733 -0.0549354238 -0.0226594783 -0.0392704805 -0.0210007371 0.0035628230 -0.0058834858 0.0069333179 -0.0019286204 -0.0098932718 -0.0115629040 0.0279950672 -0.0075419313 -0.0290623353 0.0222606466 0.0568910950 0.0500903129 -0.0976401916 0.1162238135 0.0506412592 0.0651383669 0.0065570831 -0.0713992654 -0.0684301490 0.0196673366 -0.0368061094 -0.0149360763 0.0550659051 -0.0924726693 0.0004567514 0.3105419983 0.2416214302 -0.2643479774 0.1046118896 -0.3712511508 0.4177866862 -0.5885936773 0.0231868144 -0.0983686348 0.0098937035 0.0047913219 0.0537602061 -0.0175350387 -0.0147045472 0.0098230261 -0.0259298425 -0.0392771554 0.0432086364 -0.0010935705 0.0026656476 0.0026478331 -0.0006138330 0.0023780007 0.0022501724 0.0001685978 0.0041270149 -0.0013594119 0.0000135976 0.0080133924 -0.0052919378 0.0021861265 0.0148451298 -0.0105631228 0.0016502066 0.0125661424 -0.0068694841 -0.0017187293 -0.0016413062 0.0067010738 0.0001729250 0.0007028234 0.0002615633 -0.0022154616 0.0005938624 -0.0014718040 0.0043566527 0.0207334051 -0.0155566146 0.0020710296 0.0179511998 -0.0094551097 0.0004220337 -0.0003369726 0.0033047676 -0.0007899294 0.0020382238 0.0022258175 -0.0000573420 0.0031335956 0.0018096829 -0.0002619182 0.0036054605 0.0018382908 0.0002776044 0.0013443322 0.0026708621 0.0015804820 -0.0021495096 0.0039116011 -0.0012916507 0.0021555618 0.0017253824 0.0024253128 0.0004012729 -0.0001254798 -0.0008478906 0.0047895964 0.0015460898 0.0007038859 0.0016951283 0.0032933718 -0.0039234129 -0.0039618305 0.0011064965 -0.0023295667 -0.0029510098 0.0000886022 0.0062926380 0.0011386130 -0.0004475212 0.0010956811 -0.0032055895 -0.0016239689 -0.0033852226 -0.0066718886 -0.0055754346 -0.0012595391 -0.0059342453 -0.0042882076 -0.0033942338 -0.0039775371 -0.0019717552 -0.0010687600 0.0009838551 0.0075575981 -0.0045827974 -0.0044435842 -0.0032143983 -0.0004851746 0.0046977059 0.0140846305 0.0000744933 -0.0036805362 -0.0007947353 0.0008512995 0.0009174271 0.0078212383 0.0012839136 -0.0039199000 -0.0014610735 0.0028685618 0.0045899430 0.0142366657 0.0060392554 -0.0059031992 -0.0044616172 0.0055909957 -0.0041944834 -0.0017980383 0.0058050275 -0.0043859335 -0.0063905959 -0.0005640197 0.0017032101 -0.0018404632 0.0082467224 -0.0066407979 -0.0099418253 -0.0026705461 0.0038894587 -0.0024109231 -0.0003927279 0.0017038307 0.0028287388 -0.0054508654 0.0056302390 0.0040977828 -0.0027836773 0.0041115562 0.0065110336 -0.0123106038 0.0112807356 0.0090050195 0.0112532211 0.0048852196 0.0148911271 0.0328881337 -0.0212457154 0.0338934527 0.0037793890 -0.0011873523 -0.0161053588 0.0016477838 0.0339180397 0.0378721402 0.0074035586 0.0203779942 0.0063066845 0.0127208623 0.0321138711 0.0074128533 -0.0001712994 0.0199369535 -0.0020659247 0.0143401950 0.0143120486 0.0128705994 0.0051522420 0.0035728774 -0.0001609820 0.0029293398 0.0162292449 0.0251171703 0.0039714388 0.0116105550 0.0132486588 -0.0055122942 0.0059791855 0.0001494723 -0.0065381582 -0.0032283669 -0.0204014036 -0.0007519416 0.0067681254 -0.0012153823 -0.0063416784 0.0094935228 0.0024228636 -0.0088364432 0.0082524420 0.0006345434 0.0026947609 0.0058873082 -0.0055870112 -0.0105303208 0.0077166296 -0.0010579875 -0.0040230892 -0.0016276791 -0.0013346852 -0.0151086652 0.0043789413 -0.0422947161 -0.0222474561 -0.0289725675 0.0068878642 0.0044748301 -0.0153679565 0.0505025413 -0.0555783217 -0.0756960669 -0.0015801336 -0.0080054106 0.0320029373 -0.0236986809 0.0744723845 -0.0405427315 0.1457343510 0.0371769891 -0.0095064571 0.0707749638 -0.0219775275 0.0449763186 -0.0607016265 0.0375025942 -0.0087437183 0.0482410612 -0.0202831802 0.0320341861 -0.0194894618 -0.0507868784 0.0606506783 -0.0838450847 -0.0079583850 0.0290963224 -0.0421766183 0.0715582219 -0.0367911345 0.1016900592 -0.0329923654 0.0379014776 -0.0268518923 -0.0837632403 0.0887538299 -0.1287014605 0.0033997262 0.0251053571 -0.0202914311 0.0453325429 -0.0125908232 0.0308060223 0.0448687460 -0.0108417179 0.0269295767 0.0514861237 -0.0216477025 0.0575707757 -0.0017713201 -0.0152803696 -0.0481606742 0.0524019734 -0.0300392609 0.0564063560 0.0376951799 -0.0171963015 0.0336356984 0.0087699069 -0.0120931083 -0.0229626699 0.0256530768 -0.0256489465 0.0039906461 0.0648351871 -0.0349221064 0.0749944328 0.0416401349 -0.0152701506 0.0439784739 -0.0080242489 -0.0062976177 -0.0522961845 0.0214310609 -0.0287020584 -0.0062873250 -0.0298915571 -0.0100838010 -0.1037553892 -0.0188384860 0.0368038217 -0.0875447316 -0.0151212176 0.0169401288 -0.0406916500 0.0062322474 0.0099892289 -0.0148471787 0.0022855592 -0.0280871252 0.0172320421 0.0300238938 -0.0285918499 0.0239574694 -0.0003204435 0.0110444658 -0.0024406691 -0.0062656274 0.0398915366 -0.0042570042 -0.0288797309 0.0202151261 -0.0272449044 -0.0186401990 0.0622958987 0.0048451671 0.0643372796 0.0235701309 0.0120037884 0.0346192400 -0.0807513587 0.0528850036 -0.0865843597 -0.0102987933 -0.0804046978 -0.1285503983 -0.0456086511 -0.0000992292 0.0201297398 -0.0016107183 -0.1503311153 0.0207591102 0.0954990953 0.0522613580 -0.0007106701 0.0762216895 0.0293592368 -0.0136407042 0.0407141061 -0.0038086770 -0.0457260594 0.0812659168 -0.0040554090 0.2407891337 0.1745596984 -0.0506782392 0.1541955180 -0.1740080562 0.1265006482 -0.1250809292 0.0480430065 -0.0194130401 0.0332694233 -0.0743719655 -0.1315250579 -0.1584924844 0.0345935456 -0.2597354361 -0.2268190157 0.0628877696 0.0474516453 0.0068844593 -0.0014065466 0.0098406528 0.0097697525 -0.0063234121 0.0103237866 0.0108591230 -0.0076289540 0.0105221025 0.0115911013 -0.0100994086 0.0131554316 0.0042197593 -0.0176786181 0.0239299362 0.0048496728 -0.0144918404 0.0223855818 0.0132948838 -0.0037002603 0.0076896285 0.0108957452 -0.0041077688 0.0089948815 0.0138833649 -0.0050449927 0.0002816000 -0.0020662185 -0.0254801774 0.0292541459 0.0037251573 -0.0228901234 0.0267989177 0.0065445110 0.0180582910 -0.0141132185 0.0060252724 0.0206829735 -0.0117199447 0.0043657944 0.0180807822 -0.0098744361 0.0020260633 0.0151405119 -0.0136652655 0.0046838640 0.0123908543 -0.0158407401 0.0086608289 0.0215408080 -0.0156698752 0.0073962091 0.0191841663 -0.0110152905 0.0060415743 0.0046930349 0.0081381170 0.0010101350 0.0105985894 -0.0120284630 0.0053251865 0.0092241272 -0.0160147579 0.0077113685 0.0017273115 -0.0062188164 0.0207296350 -0.0069383890 -0.0052717779 0.0022502853 -0.0136605308 0.0183548382 0.0123023367 0.0060231386 0.0167465820 0.0019323414 0.0090301041 0.0069371372 -0.0018590430 0.0117944507 0.0130224890 -0.0011872986 0.0003632076 -0.0132645780 -0.0034727568 -0.0037976499 -0.0203174719 -0.0029845183 -0.0049586870 -0.0265636837 -0.0060498509 -0.0138484206 -0.0409078283 -0.0010088665 0.0140512399 0.0208569782 -0.0029632559 0.0057704630 0.0040122688 0.0014607621 0.0183014231 0.0320541022 -0.0042834376 0.0039995166 0.0061084845 -0.0090829415 0.0089296768 0.0048720372 -0.0132119926 0.0096126413 0.0047648445 0.0008367436 0.0011462101 0.0034965513 0.0117503828 -0.0095044980 -0.0043465674 0.0053652311 0.0017351130 0.0064772997 0.0247412806 -0.0176159756 -0.0096147825 -0.0114668613 0.0030737371 0.0021137093 0.0048130721 -0.0082711593 -0.0044256053 -0.0179560811 0.0040933317 0.0015279332 0.0117957069 -0.0157032335 -0.0098161771 -0.0599818579 0.0414665701 0.0474102780 0.0406998961 -0.1113667027 0.1598769390 -0.0602857791 0.1039940021 -0.1810937034 -0.2243785217 0.2045971061 0.1960571112 -0.0361184101 -0.1027241030 -0.0043676581 -0.0659327245 -0.1899227976 -0.0169199572 0.0154382621 -0.1146177806 0.0361846131 -0.0996584239 -0.0586829116 -0.0508416476 -0.0007876527 0.0058519951 -0.0023581553 0.0056404783 -0.0001500299 -0.0062558738 0.0010427654 -0.0011714288 -0.0094387400 -0.0015136066 -0.0048709736 -0.0101618035 -0.0000716547 0.0000131535 -0.0115577244 -0.0017356745 -0.0056499682 0.0029923140 0.0036730013 -0.0063029900 -0.0058372454 0.0137318093 -0.0142309315 -0.0039583787 0.0060267019 -0.0074218819 0.0038553968 0.0149092914 -0.0148206880 -0.0045649429 -0.0091762333 -0.0128247692 0.0063076162 -0.0007593081 0.0016852736 -0.0190918919 -0.0006087564 -0.0005633887 -0.0140557372 -0.0150914525 0.0263067400 -0.0136425941 0.0153284236 -0.0153933838 -0.0222210611 0.0006671789 -0.0140830012 0.0221384204 -0.0485585149 0.0439878652 -0.0820812417 -0.0275447302 0.0231321379 -0.0351323933 0.0051037043 -0.0190651417 0.0413918783 -0.0237364883 0.0206908867 -0.0135851334 0.0038499553 -0.0052289630 0.0119909655 0.0177845133 -0.0253873109 0.0509309846 0.0003209130 -0.0057511399 0.0412858363 -0.0398950288 0.0361397356 -0.0375755899 0.0127289568 -0.0090235972 0.0090905218 0.0358696694 -0.0415131014 0.0759233212 -0.0094369223 -0.0084081184 0.0117162664 -0.0295693530 -0.0006467427 -0.0175562428 -0.0216178451 -0.0072650209 -0.0183929326 -0.0368747740 0.0006041809 -0.0279327151 0.0079622574 0.0084149164 0.0243054458 -0.0314212743 0.0138466765 -0.0123175380 -0.0316913910 -0.0020759799 -0.0394012971 -0.0101293826 0.0004154739 -0.0183550327 -0.0045663763 0.0160263104 0.0225773354 -0.0484160779 0.0235907268 -0.0195350801 -0.0385971143 -0.0065562583 -0.0565515440 -0.0045503332 -0.0039959918 -0.0258805819 0.0056037119 0.0226201627 0.0474356340 0.0303396992 0.0094087797 0.0536010614 0.0052457865 -0.0112056358 0.0846999344 0.0029296502 -0.0077727283 0.0359177922 0.0014736670 -0.0009278147 0.0105634740 0.0196141372 -0.0184682251 -0.0234863131 0.0274954811 -0.0015727279 -0.0540399232 0.0225806296 0.0048466120 -0.0279932163 0.0268337460 0.0180503197 0.0182525013 0.0133283272 0.0125295700 0.0412409342 0.0527250875 0.0222539915 0.0257914483 0.0608147207 0.0400687751 -0.0008908902 0.0005102003 -0.0267979059 -0.0867015877 -0.0303801842 -0.0886106643 0.0027948754 0.0004250330 -0.0071573476 0.0518668808 0.0201306678 0.0064908458 0.0278702259 0.0100878004 0.0323172671 0.0543957194 0.0405512350 0.0137218049 0.0172849748 0.0505256721 0.0366531028 0.0454822570 0.0741539507 0.0201955561 0.0214338907 0.0486497133 0.0335149897 0.0189413817 0.0639110799 0.0454679227 -0.0778877377 0.1241304416 0.0709831376 0.0266386823 -0.0094460267 -0.0334334216 0.0782115554 -0.0458014492 -0.1243393096 -0.0308041190 -0.0610897751 -0.1507951018 0.0329147709 -0.0020940749 0.0130759895 0.0056198140 -0.0025565235 0.0190598551 0.0030805925 -0.0022154466 0.0207023054 0.0006478642 -0.0087995573 0.0163521063 0.0027104444 -0.0092669307 0.0132877650 0.0053451350 -0.0074875248 0.0129456025 0.0060901752 -0.0033908681 0.0205470082 0.0004290779 0.0008003600 0.0220178740 -0.0031162574 -0.0150578142 0.0034806437 0.0001689148 -0.0098349221 0.0099754329 0.0087236714 -0.0107738303 0.0131572646 0.0093874375 -0.0019930408 0.0097289921 0.0096229997 -0.0034459078 0.0127607506 0.0080072123 0.0003139679 0.0126076381 0.0078204990 0.0016357214 0.0081822168 0.0087039905 0.0042801272 -0.0003763775 0.0110819885 -0.0013230569 0.0116734403 0.0089177847 -0.0048286012 0.0128614052 0.0063226540 0.0074539926 0.0066201971 0.0011285291 0.0003048988 0.0088904100 0.0087513101 0.0084744625 -0.0053781346 0.0143996565 -0.0261159054 -0.0003443546 -0.0007221532 -0.0090586080 -0.0058295448 -0.0017843718 0.0199161334 0.0070698524 0.0014928356 0.0015933553 -0.0008042885 -0.0058732724 -0.0007701128 -0.0067226734 -0.0139947631 -0.0015828495 -0.0058794338 -0.0113378680 0.0018362751 -0.0075408479 -0.0076278243 0.0036886911 -0.0026641130 0.0099389300 0.0038490146 -0.0090333572 -0.0112036897 0.0059571544 0.0001145558 0.0202935457 -0.0010215131 -0.0042608654 -0.0019408826 0.0026454298 -0.0011669214 0.0132787625 -0.0023582453 -0.0042682589 -0.0024584318 0.0039497541 0.0020804530 0.0263253015 0.0129659695 -0.0133086871 -0.0088219574 0.0122359408 -0.0128757840 -0.0063818147 0.0151093861 -0.0178404755 -0.0049816714 -0.0047915581 -0.0118304359 0.0073827442 0.0273847356 -0.0211208481 -0.0074256916 -0.0092289015 -0.0101372570 0.0109871558 -0.0065790101 -0.0085117153 0.0043375409 -0.0198937841 -0.0042434371 0.0164555928 -0.0165548407 -0.0060095413 0.0052846572 -0.0398511241 0.0040971107 0.0288800348 -0.0460032096 0.0539800220 -0.0081027211 0.2097993139 -0.2428611522 0.2076883269 -0.0789146494 0.1197250878 -0.4775478945 -0.3530685345 0.3724846707 0.2799876525 0.0118738577 -0.0574537661 0.0045973947 -0.0060921031 -0.0430810982 0.0235278490 0.0333011308 -0.0743386750 0.0043676430 0.0102894736 -0.0686896997 0.0219824722 0.0102599429 0.0300249921 -0.0070548028 0.0223002415 0.0374660444 0.0294295413 0.0115813149 0.0273643637 0.0017585077 -0.0171297670 0.0007163730 -0.0234719995 -0.0104757120 0.0045794689 -0.0622600195 -0.0163381053 -0.0091491342 0.0197446166 -0.0118388000 0.0001978687 -0.0058139049 0.0257132745 -0.0325742398 -0.0044407206 0.0219275167 -0.0273656874 0.0039625745 0.0390926604 -0.0381564692 -0.0086433490 -0.0517252860 -0.0410350054 0.0367350553 -0.0298073807 0.0306993601 -0.1154307524 -0.0438336918 -0.0394565516 -0.0000726179 -0.0412805637 0.0754873564 0.0820979533 -0.0486410067 -0.1813406434 -0.0453668354 0.0626877391 -0.0315910229 0.0376779026 -0.0113307269 0.0275638061 -0.0741779106 0.0040956410 0.0097927513 -0.0361079516 0.0280051635 -0.0289500144 0.0422039423 0.0157638869 0.0013464855 0.0041186215 0.0138233608 -0.0052292045 -0.0235139459 0.0268874075 -0.0267058221 0.0184122115 0.0256181544 -0.0211144347 0.0451615021 0.0109876691 0.0140935978 0.0017004840 0.0082574305 -0.0014142626 -0.0484681456 0.0294964436 -0.0399169504 0.0168629445 0.0369414791 -0.0153917118 0.0322816052 0.0103253158 0.0205773109 -0.0030820226 -0.0023528311 0.0320507415 -0.0138808540 0.0100247033 0.0256041350 -0.0153130198 -0.0146296013 0.0019600824 0.0206970446 0.0041764489 0.0090906999 -0.0285871292 0.0005290580 0.0331055094 0.0049242918 -0.0111073268 0.0207729081 0.0283029395 -0.0102449345 -0.0041244222 -0.0136538316 0.0148319710 0.0011195532 -0.0430043014 -0.0004256448 0.0457164110 0.0041799583 -0.0167315083 0.0269853699 0.0491291490 -0.0142455733 -0.0197252492 -0.0239014794 -0.0214948219 -0.0078059571 0.0392864021 0.0228491295 -0.0266242357 0.0790269940 0.0275014417 -0.0441625880 0.0253929374 0.0207580791 -0.0145497625 -0.0047208222 -0.0082693730 -0.0049272534 -0.0132793547 -0.0162529463 -0.0074120781 -0.0112067559 -0.0065567427 -0.0118355442 -0.0159253924 -0.0161499723 0.0097025813 -0.0177736740 -0.0220526863 0.0176036493 0.0211470230 -0.0416830892 0.0593791902 0.0008145694 0.0866407456 -0.0015614536 -0.0055527043 -0.0124086101 0.0165481540 -0.0132471042 0.0398417406 0.0002370529 0.0199935354 -0.0506451150 -0.0485057099 0.0638745618 -0.0085106501 0.0272351346 -0.0338460657 -0.0116519588 0.0882058331 0.0789667724 -0.0507488362 0.0574787646 0.0489995367 -0.0453286093 0.0738050032 0.0036180335 -0.0421743650 0.0920250892 -0.0256412647 0.2606972344 0.1541928297 -0.0402700306 0.1824000138 -0.2047432635 0.0676621646 -0.0621494154 0.0282962364 -0.0252997255 0.0010225511 0.0152791196 0.0293053472 0.0669628269 -0.0050004081 0.0865543008 0.0915607189 -0.0214533429 -0.0271734740 0.0133590447 0.0400828679 0.0222772329 0.0182349881 0.0397483858 0.0186665108 0.0200964506 0.0390815929 0.0123070585 0.0053913946 0.0255304235 0.0206347388 -0.0070711134 0.0150719896 0.0391808437 0.0000798765 0.0247460277 0.0371815418 0.0230164722 0.0440192311 0.0121524886 0.0265159802 0.0443346626 0.0035179607 -0.0060299301 -0.0003571227 -0.0027257878 -0.0194983170 -0.0017534638 0.0517338895 -0.0074933929 0.0178052185 0.0475620966 0.0147923252 0.0102155693 -0.0067215557 0.0027714832 0.0355867377 -0.0106587204 -0.0002471958 0.0428910053 -0.0114862583 -0.0042890637 0.0388880095 -0.0170146307 0.0109702011 0.0085973626 -0.0117673012 0.0239414584 0.0054411425 -0.0057970819 0.0013778467 0.0392556481 -0.0117215974 0.0128702148 0.0099452242 0.0071726125 -0.0149043263 0.0484330361 -0.0190223949 0.0144289627 0.0023234815 -0.0094444107 -0.0399217575 -0.0020206867 -0.0119791360 0.0186933940 -0.0234576787 -0.0158829679 0.0237249880 -0.0093116346 0.0186583648 0.0183930900 -0.0106277509 0.0171175612 0.0004786883 0.0069195557 -0.0195212448 -0.0092593487 0.0119501024 -0.0040113943 -0.0022355064 -0.0064552622 -0.0443427868 0.0001457244 0.0011977942 -0.0193219223 -0.0062433570 -0.0193570050 -0.0766243603 -0.0006547514 -0.0090108986 -0.0346635907 -0.0025799327 0.0259812183 0.0301728158 0.0007548328 0.0227573072 0.0340505795 0.0042178147 0.0334344740 0.0494605560 0.0027964752 0.0292099066 0.0685370833 0.0113327146 -0.0176527390 -0.0123230324 0.0052318721 -0.0146681751 -0.0029048892 0.0389553673 -0.0403398048 -0.0158536483 0.0163204484 -0.0379211855 -0.0020236487 0.0748930042 -0.0504275279 -0.0231033056 0.0337267161 -0.0473857571 -0.0113061270 -0.0365585617 -0.0042577628 0.0209243821 -0.0368222374 -0.0110675490 0.0300000672 -0.0718639626 0.0081740743 0.0310634998 -0.0724387071 0.0019202398 0.0516973831 0.0107186353 -0.0347361654 -0.0875684911 -0.1749413635 0.2203172706 -0.2746773085 0.0447607029 -0.0632281378 0.2538760323 0.1980675723 -0.3120912399 -0.3237255318 0.0010620436 0.0067737665 0.0022325965 -0.0084810203 0.0233351315 0.0149741944 0.0021692629 0.0044352678 0.0012459319 0.0137571171 -0.0043931803 0.0146234069 0.0131212932 0.0502028552 -0.0334152164 0.0632276277 0.0005803138 -0.0742742792 0.0334571719 -0.0014787232 -0.0824577028 0.0179993572 -0.0094449943 -0.0791632189 0.0217515370 0.0253795143 -0.0557046624 0.0225134394 -0.0061039402 -0.0245617975 0.0515154937 -0.0187016794 -0.0555536709 0.0365480506 -0.0318387973 -0.0435696654 -0.0228985501 0.0241436950 0.0152270984 0.0181044824 -0.0238822999 -0.0387423273 0.0372761922 -0.0003198649 -0.0331293179 0.0258168896 0.0252203161 -0.0523465940 0.0317847033 -0.0149275139 -0.0042097858 0.0979032700 -0.0455887022 0.0585599760 -0.0304280634 -0.0255198236 0.0045081218 -0.0042033485 0.0134893952 -0.0238776037 0.0364458990 -0.0286439212 0.0646964677 0.0186326313 -0.0127787475 0.0271903769 -0.0091440803 0.0164507605 -0.0340211681 0.0131225336 -0.0094063743 0.0073316958 -0.0033338985 0.0058540106 -0.0059449754 -0.0169997647 0.0202076804 -0.0366603691 -0.0061099835 0.0085488252 -0.0328559023 0.0249111075 -0.0202166874 0.0252938757 -0.0041889565 0.0060186773 0.0014119018 -0.0278164314 0.0307012573 -0.0507412074 0.0039598806 0.0091444397 -0.0135312816 0.0244256804 -0.0008358209 0.0129839908 0.0202354346 0.0026224647 0.0147412408 0.0313478087 -0.0019066329 0.0234179404 0.0018532948 -0.0029736241 -0.0214970878 0.0312671429 -0.0084553557 0.0213895308 0.0253311543 0.0003675059 0.0192212662 0.0089513709 0.0007073563 -0.0036593857 0.0152359093 -0.0086609490 -0.0029439897 0.0404155167 -0.0129276835 0.0297680600 0.0279729156 0.0015049711 0.0259735886 -0.0025229730 0.0059148589 -0.0104934965 0.0120359134 -0.0126735655 -0.0108303186 -0.0128206471 -0.0015125596 -0.0469076386 -0.0087454911 0.0118956499 -0.0565653130 -0.0058793684 0.0023290301 -0.0226800750 -0.0508568721 0.0356933058 0.1058891460 -0.0075195537 0.0141156022 0.0161905977 -0.0082143068 0.0075498162 0.0282850882 -0.0164536147 0.0170461455 0.0088733060 -0.0059382763 -0.0142644233 -0.0176324505 0.0164076154 0.0017123845 -0.0308078766 0.0034567944 -0.0254939029 -0.0236576623 -0.0530961422 -0.0483203461 0.0130357242 0.0025312290 -0.0058405580 0.0505473979 -0.0322128783 0.0316752199 -0.0119724829 -0.0057631447 -0.0218555323 -0.0182240881 0.0238145001 0.0329830035 -0.0926441916 0.0685656019 0.0255408009 0.0113931918 0.0225077140 -0.0136057658 -0.0354099279 0.0097074471 -0.0485726608 -0.0302563078 -0.0120613627 -0.0282825427 -0.0174876243 -0.1517297046 -0.1258445703 0.0749696811 -0.1058379633 0.0600501626 -0.0042595276 0.0321085762 -0.1149101794 0.0025986900 -0.0330299223 -0.0002378521 -0.0525419209 -0.0413216271 0.0356107959 -0.0346261586 -0.0480305587 0.0852621324 0.0013525143 -0.0067987605 0.0878786124 0.0076226935 -0.0290645917 0.1024561100 0.0165244127 -0.0383554537 0.0939157496 0.0148743093 -0.0752820130 0.0817283656 0.0153928739 -0.0631810381 0.0834993750 0.0069572211 -0.0442054214 0.0974867178 -0.0015008855 -0.0406211322 0.1062420789 0.0062240542 -0.0238778718 0.0787943720 0.0061445289 -0.1089353073 0.0300178392 0.0030690728 -0.0561791387 0.0789074029 0.0160077676 -0.0576901969 0.1257405838 0.0012302167 -0.0260970083 -0.0093320716 0.1275020297 -0.0093184718 -0.0480880808 0.1263822309 0.0151982003 -0.0316470310 0.1154799798 0.0129267371 -0.0125160809 0.1244798982 -0.0194768469 0.0214639283 0.1188744566 -0.0249843373 -0.0135897034 0.1294376677 -0.0115719404 -0.0720737731 0.1190946311 0.0417684720 0.0173230759 -0.0084647674 0.0197797991 -0.0136147203 0.1258592539 -0.0199829614 0.0461704740 0.1267243003 -0.1583665772 0.0148461044 -0.0013698618 -0.0827147370 -0.0066988157 -0.0064457253 0.1276513276 0.0925176419 -0.0490451333 -0.0238880413 0.0038511029 -0.1008014750 0.0296522738 -0.0297652877 -0.0972412915 0.0153873222 -0.0331325056 -0.1036161145 0.0648395144 -0.0351822487 -0.0097888663 0.0657069821 -0.0256396181 0.0899659583 0.1027551010 -0.0281969544 0.0101891860 0.0908243726 -0.0040797930 0.1923753402 0.0027313582 -0.0526511135 -0.0725452296 0.0360392642 -0.0426283212 0.0420441160 -0.0315830816 -0.0624232734 -0.1027660046 0.0336116674 -0.0407846513 0.0982484580 0.0763898043 -0.0544150497 -0.0609581183 0.0769049367 -0.0688494752 -0.0786647783 0.0372637402 -0.0691944352 0.0124497026 -0.0973370634 -0.0599420432 0.0894023934 0.0800000392 -0.0641388527 0.0341363344 -0.1744517853 -0.0385246552 0.1645723323 0.0000807112 -0.0980895581 -0.0483997781 -0.1134637418 -0.0684187625 0.0663499874 -0.0199184469 -0.1181452526 -0.0944970933 -0.2111718916 -0.0513007455 0.1217826849 0.0013580211 0.0064676910 0.0304603789 -0.0155709260 0.0155278644 0.0242802457 0.0023369459 0.0007380893 0.0582529736 0.0256422493 -0.0016705306 0.0200503921 -0.0086376461 0.0184067328 0.0044586703 -0.0021054806 0.0058081318 -0.0053671486 -0.0132719914 0.0234457919 0.0058248929 -0.0140407958 0.0269968430 -0.0071880582 0.0020737900 0.0108973888 0.0016996655 0.0037490706 0.0171863224 0.0209080778 0.0011335595 0.0135844068 0.0110513782 -0.0109780266 0.0023643339 0.0008835075 -0.0072672109 0.0022629967 -0.0182562490 -0.0127178082 -0.0048577217 0.0173319180 -0.0130516272 0.0020009117 0.0061194170 0.0141665298 -0.0163923725 0.0036172777 0.0161282701 -0.0210678722 0.0018399242 0.0267601830 -0.0213237027 0.0005537298 -0.0360489361 -0.0205929982 0.0297943607 -0.0142644703 0.0124700828 -0.0377174183 -0.0266859946 -0.0120192094 0.0074676868 -0.0369086082 0.0484500218 0.0357994368 -0.0134733762 -0.0721459816 -0.0140165497 0.0104942895 0.0170876726 0.0042452677 0.0131653829 -0.0095244725 0.0368487293 0.0079758531 0.0018587024 0.0167746775 0.0060199163 0.0222667518 -0.0162476676 0.0262903431 -0.0071036841 0.0267596509 -0.0200534019 0.0265968507 -0.0259692037 -0.0192571280 0.0364181234 -0.0381051356 0.0160008083 0.0095540205 -0.0042583638 0.0441617463 -0.0250697103 0.0533615881 -0.0384425275 0.0355260214 -0.0431400518 -0.0359992381 0.0536932896 -0.0592351701 0.0151523971 0.0138590559 -0.0012300209 0.0176018109 -0.0006835970 0.0046111656 0.0225958658 -0.0048379446 0.0010731374 0.0108685385 -0.0024694077 -0.0010778681 0.0052264353 -0.0073219058 0.0000441363 0.0131421227 -0.0075123365 0.0023974765 0.0064292617 -0.0002397783 -0.0046988801 0.0027274947 -0.0021232746 -0.0054351844 0.0105859680 -0.0099520051 0.0044113920 0.0176055125 -0.0097462462 0.0051108495 0.0054666741 0.0036581431 -0.0065679147 -0.0013513470 -0.0002068025 -0.0082173051 0.0126264964 -0.0136535291 0.0092127991 0.0024827638 -0.0090095576 0.0010328952 0.0174773194 0.0090864968 -0.0196865255 0.0192863834 -0.0052694035 -0.0193135761 0.0174635058 -0.0155739684 -0.0164089627 0.0066778464 0.0269426698 0.0173614692 -0.0182886688 0.0453897092 -0.0097221302 -0.0279876719 0.0537325673 -0.0214501561 0.0134626617 -0.0557366568 -0.0298501738 0.0742608294 0.0039224198 0.0152902891 0.0491541698 -0.1001153648 -0.0437793821 -0.1043792749 -0.0988542309 0.0071881916 -0.0302666365 0.0388094194 -0.0285758528 -0.0397741532 -0.0004922988 0.0374886043 -0.0088283178 -0.1233368994 0.0897560685 0.1002907103 0.1118341312 -0.2017033112 0.2332429400 0.1253169681 0.1798682580 0.0698665594 -0.0886964986 -0.0768118672 0.0565322453 -0.1301918824 -0.0472578692 0.0402154501 -0.1234524663 -0.0210008675 -0.3426467032 -0.2940846201 0.1265140734 -0.2311874507 0.1667135107 -0.0665271048 0.1115228437 -0.2130771705 0.0049755729 -0.1169703973 0.0398383571 0.0700661618 -0.0170431138 -0.0669940509 0.0993188222 0.0080694574 -0.0092546768 -0.0064269140 0.0077054022 0.0151534895 0.0049225739 0.0111467086 0.0108347190 0.0043676175 0.0123826981 0.0105328347 0.0015346491 0.0100399771 0.0073568599 0.0037807068 0.0061514101 0.0099004473 0.0065017030 0.0084133887 0.0149488368 0.0052029611 0.0136173024 0.0095523012 0.0054837959 0.0128440071 0.0105771220 0.0012766912 0.0073132799 -0.0025929236 -0.0002863241 0.0017940329 0.0076606858 0.0071673565 0.0084966333 0.0153237301 0.0049477685 0.0095423861 0.0019727398 -0.0221272374 -0.0013974743 0.0246836959 -0.0260503044 -0.0069671173 0.0263726403 -0.0250370251 -0.0076884538 0.0228442490 -0.0278247429 0.0051492649 0.0017981459 -0.0231749163 0.0148984092 -0.0045785306 -0.0202173541 -0.0022464396 0.0307841069 -0.0257058854 -0.0023582937 -0.0039434292 0.0034169775 -0.0122406697 0.0279455999 -0.0292868646 0.0065031706 -0.0043294725 -0.0235006509 -0.0015484084 -0.0062666164 -0.0009597254 0.0145278289 -0.0087401053 -0.0045086384 -0.0060974827 -0.0287647359 0.0175523942 0.0101960277 -0.0160713744 0.0225101765 -0.0041269489 0.0067737111 0.0037800157 -0.0069993901 0.0094160102 0.0116187393 -0.0097788106 0.0010105890 -0.0188133014 -0.0087736611 0.0034828290 -0.0192395573 -0.0163255643 -0.0059113287 -0.0364281056 -0.0122048996 -0.0039006390 -0.0388346699 -0.0024965694 0.0181887587 0.0231495945 -0.0049479207 0.0156284083 0.0114172549 0.0049491479 0.0227099357 0.0353784962 -0.0037096132 0.0184114317 0.0207092512 -0.0015378886 -0.0029782823 0.0016116891 -0.0030905367 0.0002496002 0.0092383754 0.0177039726 -0.0109185195 -0.0122647581 0.0226616289 -0.0068785753 -0.0139725504 0.0299395087 -0.0179130446 -0.0212504624 0.0407646986 -0.0129481885 -0.0298772989 -0.0155063466 0.0141175223 0.0193953024 -0.0036034891 0.0098791227 0.0086326890 -0.0300419235 0.0242868894 0.0332500120 -0.0114352931 0.0175331367 0.0144841739 0.0460185314 -0.0040191290 0.0954877038 0.1576380311 -0.1574189722 0.2078746796 0.0070175725 -0.0343965621 -0.0715726366 0.0023810771 0.1677265155 0.2286629769 0.0180849151 0.0538965049 0.0236103360 0.0196589916 0.0569343786 0.0242666733 0.0071067087 0.0621514187 0.0242177446 0.0358210827 0.0560511264 0.0159275112 -0.0215409500 -0.0338290429 0.0121122783 -0.0618137362 -0.0164541468 -0.0025487965 -0.0392163176 -0.0216174040 -0.0135562088 -0.0319391053 -0.0102009515 -0.0315010095 -0.0428091664 -0.0277035162 -0.0004966707 -0.0367823663 0.0343590479 -0.0522836740 -0.0319925687 0.0092826917 -0.0333285106 -0.0881193363 0.0478144511 -0.0206876567 -0.0572692252 0.0743295531 -0.0211119791 -0.1193267122 0.0484931386 -0.0335977209 -0.0282160527 0.0374089743 -0.0619529256 -0.0430902134 -0.0297334862 0.0258142034 -0.0585708321 -0.0059281799 -0.0069379894 -0.0317822089 -0.0966796129 -0.0361620724 -0.0893680574 0.0731955085 0.0228314166 0.0672210920 -0.0227755111 0.0227596470 0.0054027313 -0.0008487185 0.0132346138 0.0002876671 0.0011926513 0.0059261625 0.0037294633 -0.0122704405 0.0133940851 0.0250783790 -0.0112251445 0.0434761407 -0.0340348131 0.0169857783 -0.0514344387 -0.0314381740 0.0089970814 -0.0357785961 0.0065115205 -0.0109983580 0.0246786212 0.0417168837 -0.0201237168 0.0717188112 -0.0527630893 0.0276893128 -0.0923195224 -0.0523557073 0.0181315693 -0.0681994714 0.0447953418 -0.0075682913 0.0276541086 0.0431602388 0.0114698970 0.0178672285 0.0317894667 0.0219467440 0.0126121902 0.0504382053 0.0083969028 0.0174779846 -0.0310849304 -0.0251503463 -0.0239898153 0.0503025744 -0.0273154042 0.0110031937 0.0278135178 0.0220754518 0.0257892969 -0.0197624091 0.0085871145 0.0003482981 0.0075699729 -0.0451048881 -0.0065261220 0.0819499146 -0.0450410939 0.0141729974 0.0340787240 0.0423518936 0.0399314602 -0.0458371024 0.0235288321 -0.0043733035 0.0036632758 -0.0726393328 -0.0170177218 -0.0690792836 -0.0342063534 -0.0519238452 -0.0316547263 0.0012537064 0.0251972834 -0.0291841137 0.0347888004 0.0200409134 -0.0195735433 0.0701093532 0.0153412399 0.0063487696 -0.0067405144 0.0091943763 -0.0232070760 0.0328672505 -0.0501743779 -0.0175891068 0.0308518736 -0.0298284443 -0.0043272963 -0.0023148047 0.0014022479 0.0123542027 0.0093555093 -0.0034988863 0.0843296945 0.0056458759 0.0211284383 0.0202932891 0.0159263084 -0.0166187691 -0.0709498999 0.0847999610 -0.1470852863 0.0099662571 -0.0595127947 0.0961861587 -0.0662767367 -0.0597639931 0.0293338062 0.0441977880 0.0438331572 -0.1453515699 0.1087498688 0.0727189210 0.0885842049 0.1422158163 0.0449791962 0.0152956887 0.1058178657 -0.0545177782 0.0667997032 0.0683156081 0.0416655635 -0.0046448323 0.0061302132 0.0043692349 -0.0093406595 0.0187910489 0.0272875995 -0.0750159353 0.0667409446 0.0447038756 0.0062886389 0.0659267985 0.0678452492 0.2720968550 0.0125067532 -0.0781946162 0.1047006658 0.0092679209 -0.2778719535 0.1017538884 0.0109880601 -0.0290659114 0.0338096460 0.0283114166 -0.0541136188 0.0376972448 0.0389171487 -0.0543791122 0.0358814880 0.0669469201 -0.0329594376 0.0204087226 0.0564869829 -0.0116536459 0.0196598167 0.0471647300 -0.0209736795 0.0299997534 0.0372164748 -0.0654895620 0.0559125246 0.0260076384 -0.0558786471 0.0518712714 0.0784556042 -0.0316671756 -0.0108480535 0.0503527725 0.0053386478 0.0000380831 0.0618415070 -0.0276186605 0.0177880181 0.0254551254 0.0480928058 0.0518825899 0.0599506230 -0.0021470161 0.0691122613 0.0935651049 0.0002752106 0.0670950699 0.0716630430 0.0034606666 0.0483295876 0.0355879318 0.0520986621 0.0278145032 0.0349544878 0.0762650560 0.0405240808 0.0575430275 -0.0274078256 0.0581424285 0.1014739267 0.0492349530 0.0364642684 0.0617978093 -0.0170456171 0.0574241594 0.0380461633 0.0820228788 0.0406498841 0.0598473081 -0.0255980233 -0.0213735349 0.1014570073 -0.0383969143 -0.0294316090 0.1106730197 0.0814680489 0.0191562915 0.0902492512 0.0715400472 0.0169875620 -0.0403099787 -0.0099927225 -0.0331140690 -0.0407436911 -0.0115924705 -0.0440088717 -0.0440345112 0.0163677293 0.0008988768 -0.0387493816 0.0314707117 0.0298803980 -0.0501720160 0.0241780225 0.0201908094 -0.0321807806 0.0496990535 0.0731126748 -0.0408919304 -0.0066338933 -0.0404178390 -0.0388090816 0.0189167820 -0.0005398950 -0.0398251944 -0.0118236839 -0.0531190408 -0.0316514344 0.0311011104 0.0123359059 -0.0653054797 0.0099156154 -0.0189167436 -0.0691382220 0.0080508108 -0.0296565556 -0.0804439593 -0.0014508079 0.0115118172 -0.0656581084 -0.0516154750 -0.0065617329 -0.0896563701 0.0179976730 0.0456624520 -0.0689025291 -0.0640325513 0.0181546743 -0.0435400309 -0.0586442866 -0.0650194709 -0.0236688463 -0.0867685795 -0.0582808163 -0.0366104708 -0.0823039464 -0.1081114908 0.0163326923 -0.1255897355 -0.0883821049 0.0019352157 -0.0053564877 -0.0206432822 -0.0687419969 0.0892054419 -0.0901704039 0.0174447926 -0.0114425144 0.1033935648 0.0687928197 -0.1091553232 -0.1082769309 0.0074364279 -0.0399308831 0.0584957845 -0.0377349484 -0.0527133850 0.0853616272 0.0441128970 -0.0611822723 0.0724546303 0.0044843055 -0.0397603925 0.0573948343 0.0050862199 0.0081734499 -0.0044571797 0.0134835401 0.0030333654 -0.0053856338 0.0088280014 0.0041165993 -0.0030153976 0.0067036139 0.0030083353 0.0033928081 0.0079452158 0.0068076746 -0.0014681253 0.0138147020 -0.0063279868 0.0090613967 0.0118271633 -0.0008604434 0.0056334489 0.0192702993 -0.0078745839 0.0024433744 0.0108875679 -0.0118488287 0.0041370258 0.0233173557 -0.0064995793 0.0066469758 0.0165074586 -0.0043480330 0.0092213914 0.0065767490 0.0085342645 -0.0081208628 0.0161426413 -0.0054181632 0.0055203327 0.0247398907 0.0035996238 0.0238385803 0.0117102675 -0.0286151004 0.0001641027 -0.0354559414 0.0449092696 0.0007123981 -0.0070636683 -0.0126536685 0.0796219607 -0.0134498193 0.0085711965 0.0447184896 -0.0048636336 0.0476054174 -0.0213059906 0.0006412806 0.0041006689 0.0228344377 -0.0373959291 0.0397549236 0.0114531690 -0.0326307426 0.0625395937 -0.0196147958 -0.0017701431 0.0337995695 -0.0209975418 0.0151651326 -0.0239592586 0.0382021715 -0.0530004641 0.0463651325 0.0153963686 -0.0459177029 0.0903865890 -0.0313414183 -0.0035266300 0.0247028979 -0.0019974917 0.0066036845 -0.0275542591 0.0122354514 0.0239124288 -0.0405347574 0.0032590473 -0.0015368599 -0.0407980781 0.0162288736 0.0197566797 -0.0172098340 -0.0482978654 -0.0037010047 -0.0233773709 0.0036825787 0.0193007531 -0.0546884310 0.0144414420 0.0316703429 -0.0408592973 -0.0192383725 0.0060025897 -0.0066685973 -0.0290628736 -0.0133021925 -0.0165214421 0.0140057613 0.0253379736 -0.0727002272 0.0292178396 0.0424357180 -0.0485373140 -0.0279283303 -0.0020908371 0.0163467620 -0.0478967106 0.0206546393 -0.0045900946 -0.0835023534 0.0070910106 0.0349897650 -0.0543539220 0.0066611820 0.0154013879 -0.0281209587 -0.0004613467 -0.0086683384 -0.0007866647 0.0090943511 -0.0303266500 0.0127175502 -0.0142135839 0.0100518223 -0.0421988452 0.0150351222 -0.0432939008 0.0339961314 -0.0134485651 0.0162148640 -0.0025923987 -0.0402193213 -0.0068982278 -0.0121503350 -0.1123941733 0.0402976338 -0.0091275383 0.0087292757 0.0083395543 0.0058264849 -0.0662788034 0.1165150235 -0.1724146103 0.1256968688 -0.0388465105 0.1060578296 0.0978154796 0.1162487977 -0.0712029505 -0.0966341746 -0.0683198976 0.2391490289 -0.2051867341 -0.1289860376 -0.1799231251 -0.1542705444 0.0145397108 0.0305779840 -0.1295813020 0.0855188382 -0.0547814200 -0.1197829013 0.0364572468 -0.0041608265 0.0726124297 0.0643991349 -0.0111069098 0.0412079561 -0.0630839939 0.0486563350 -0.0561609660 0.0121200942 -0.0069103713 0.3428228635 0.0846695367 0.3165558827 0.1048906771 0.0663863618 0.0449679066 0.0721417004 -0.3832805793 0.1622632887 -0.0018238472 0.0080542054 -0.0056786833 -0.0058878458 0.0135333832 -0.0061031404 -0.0080786344 0.0135493730 -0.0053870563 -0.0140269277 0.0086308678 -0.0018569491 -0.0121409152 0.0034960311 -0.0009507140 -0.0099112551 0.0053172174 -0.0034764235 -0.0077179863 0.0164368689 -0.0106518583 -0.0056217442 0.0134559745 -0.0082668629 -0.0170764065 0.0069226815 0.0026687819 -0.0111236986 -0.0006708636 0.0037246533 -0.0129822325 0.0061545459 -0.0006864249 -0.0100012569 -0.0053493900 -0.0085759538 -0.0143534734 -0.0011355193 -0.0112164075 -0.0208734323 -0.0033749640 -0.0105282783 -0.0158285899 -0.0026559279 -0.0055753992 -0.0106001975 -0.0086943963 -0.0020488482 -0.0141758854 -0.0087998237 -0.0069248337 -0.0123039918 0.0009085610 -0.0080059428 -0.0219695858 -0.0133120354 -0.0082398217 -0.0113113411 -0.0007006300 -0.0069299861 -0.0110588542 -0.0153720526 -0.0048273496 -0.0155101394 0.0069573605 0.0035049985 -0.0198541083 0.0056576321 0.0061707992 -0.0193406964 -0.0238757942 -0.0023226579 -0.0233057808 -0.0143296205 -0.0096731874 0.0091032110 0.0013839349 0.0004704569 0.0077378517 0.0018030949 0.0025960988 0.0120973204 -0.0038083753 -0.0000922352 0.0108045800 -0.0066378790 -0.0000633836 0.0158156489 -0.0045764469 -0.0018025284 0.0113353025 -0.0089571118 -0.0015235467 0.0065349114 -0.0012221413 0.0021012879 0.0081949951 -0.0059808032 0.0009983633 0.0038653140 -0.0011726279 0.0017217154 0.0062210493 -0.0090286159 0.0005013370 0.0191152151 -0.0014830309 0.0025769138 0.0192999339 -0.0024518186 0.0024702749 0.0193997399 0.0007438956 0.0005695942 0.0101108201 0.0109735753 0.0077687776 0.0224448034 -0.0026541393 -0.0051243316 0.0062877533 0.0145739302 0.0074084283 0.0123060921 0.0089326598 0.0101081744 0.0024928794 0.0161928481 0.0149279596 0.0116448077 0.0119516402 0.0157609439 -0.0092915496 0.0236117024 0.0228838099 0.0324485814 -0.0489579689 0.0744550165 0.0618520458 -0.1185604541 0.1263969994 0.0143870337 -0.0725297072 0.0288317891 0.0509876343 0.0280556966 0.1274698504 0.0158826821 -0.0451663763 0.0489859527 -0.0065443282 -0.0479926677 0.0639408829 0.0348067606 -0.0547739289 0.0568012590 0.0168399562 -0.0442020897 0.0461700923 0.0013786373 0.0002603857 0.0029692743 0.0105293717 -0.0053654599 0.0024714762 0.0067457962 -0.0029865258 0.0084309790 0.0134754123 -0.0003148897 0.0101486755 0.0127408302 0.0004393979 0.0100407024 0.0138403902 -0.0070981126 0.0006540802 0.0120753289 -0.0049275079 0.0039718597 0.0100395033 -0.0016368695 0.0053591440 0.0083806283 -0.0079442584 0.0019942822 0.0093753709 0.0010052115 0.0098188453 0.0200584727 -0.0051482816 -0.0021751321 0.0196512807 -0.0104037166 0.0119114122 0.0211718995 0.0035569027 -0.0115755273 0.0100537273 0.0036533115 -0.0255513545 0.0375248006 0.0245163817 -0.0080104596 -0.0227905349 0.0077324995 0.0163327765 0.0047717483 -0.0092653979 0.0342154686 -0.0019003157 -0.0021441249 0.0185548013 -0.0091406814 0.0149097145 -0.0104991401 -0.0110958706 0.0031448083 -0.0033704305 -0.0027381162 0.0027523242 0.0185085573 -0.0062081583 0.0126694662 -0.0001407014 -0.0116926081 0.0132998732 -0.0176486645 -0.0114513752 -0.0007684660 -0.0061581714 0.0001706472 0.0006505372 0.0327889852 -0.0053396070 0.0166355921 0.0026124931 -0.0169242115 0.0024419128 -0.0001339971 -0.0177704510 -0.0162022276 0.0030343475 -0.0173291155 -0.0157085580 -0.0072955893 -0.0162680555 -0.0178914986 0.0058212301 0.0116515026 -0.0010928668 -0.0138765231 -0.0100100688 -0.0050346933 0.0200171559 -0.0024023164 -0.0274261019 -0.0030706264 0.0098257066 -0.0177582660 -0.0171499085 0.0038487171 0.0055291408 0.0106045482 -0.0121895255 -0.0021150304 0.0400292479 0.0008808788 -0.0398893322 0.0017414212 0.0167010274 -0.0234513544 -0.0274860641 0.0080911932 0.0200401505 0.0214344208 0.0202466224 0.0071948160 -0.0255127020 -0.0038997319 0.0139833340 -0.0378715798 -0.0068054076 0.0091450651 -0.0247599056 0.0009341006 -0.0075232292 -0.0015921961 -0.0249938094 -0.0107893000 -0.0058896580 -0.0202826113 0.0092952995 -0.0272565694 -0.0260010558 0.0270539024 -0.0464865862 -0.0078103037 0.0114644450 0.0296183659 0.0135162334 0.0363404727 0.0451177945 0.0911128012 -0.0092240929 0.0383019128 0.0843222677 0.0333168665 0.0107496117 -0.0336719636 0.0075743310 -0.0475303745 -0.0537781252 -0.0398623617 0.0239051975 -0.2104825548 -0.1674436913 0.1430971409 0.1110055360 0.1010555767 -0.3378768384 0.2412275091 0.2414934307 0.3043241831 0.1284168142 0.0131788364 -0.0064115964 0.1077208179 -0.0489625840 0.0877207175 0.1077080562 -0.0093752391 0.0336258462 0.0896697437 0.0511884363 0.0619173167 0.1064253086 0.0069214801 -0.1134718593 0.1808924091 0.0747370657 0.0502720885 -0.0687090083 0.0053277362 0.0779198855 -0.0546760172 -0.0833553152 0.0263050189 -0.0554342410 -0.0787466493 0.0267724703 -0.0073227143 0.0005128848 -0.0086042038 -0.0100674975 0.0141598155 -0.0145560111 -0.0116936311 0.0186852489 -0.0179655744 -0.0195673646 0.0129969529 -0.0139487323 -0.0158483552 0.0055320695 -0.0137180173 -0.0161855224 0.0020042566 -0.0113068760 -0.0129411740 0.0174626176 -0.0193207311 -0.0069539447 0.0211739729 -0.0248309239 -0.0235162801 0.0093837994 0.0025287799 -0.0125801466 0.0028821042 -0.0097791427 -0.0214379842 0.0026581114 -0.0062140393 -0.0064433371 -0.0058966203 -0.0076045666 -0.0110128368 -0.0002051957 -0.0099760238 -0.0159993038 -0.0026957722 -0.0092069429 -0.0108087887 -0.0047602006 -0.0046130452 -0.0066010476 -0.0093138300 -0.0020542893 -0.0087093453 -0.0106608343 -0.0055327007 -0.0099643082 0.0024104241 -0.0078272423 -0.0181907740 -0.0077345887 -0.0066941179 -0.0068194079 -0.0044211229 -0.0053228160 -0.0066560456 -0.0153630857 -0.0040934193 -0.0138957383 0.0044701111 0.0091660544 -0.0349338197 0.0095357339 0.0132571593 -0.0193287956 -0.0128444776 -0.0040268078 -0.0182294318 -0.0083200444 -0.0064507599 0.0104181078 -0.0018526361 0.0137008516 0.0145605921 -0.0015698097 0.0145399042 0.0113819319 -0.0082939392 0.0048269130 0.0099257548 -0.0132690218 -0.0064526974 0.0134834065 -0.0096707824 0.0014406260 0.0073762250 -0.0171773268 -0.0192165728 0.0139925193 -0.0044620028 0.0120463575 0.0123588418 -0.0112676098 -0.0008027503 0.0129661739 -0.0031974272 0.0151203105 0.0109798084 -0.0140592300 -0.0075847352 0.0119707481 -0.0009986684 0.0042578798 0.0116719199 0.0005564893 0.0065851690 0.0097420891 0.0050363626 0.0000078132 0.0102979043 0.0142762009 0.0013675584 0.0061959714 0.0029945883 -0.0049467941 0.0081333801 0.0182296777 -0.0019639236 0.0128986416 0.0113254009 0.0097988097 0.0106183432 0.0168100308 0.0063421619 0.0159002333 0.0143085504 0.0167880625 0.0090421675 0.0219193281 0.0083833250 -0.0048208384 -0.0298494433 0.0261482346 -0.1948394218 0.1396619573 -0.0947546608 0.0275898955 -0.0528001251 0.3298390641 0.1967982218 -0.2148759318 -0.1452923798 -0.0404502478 -0.0529063340 0.0015957518 -0.0780149518 -0.0900092458 0.0143099277 0.0002645568 -0.0722121000 0.0220936820 -0.0700887573 -0.0422237486 -0.0068851595 -0.0065198658 -0.0040515197 -0.0033237083 -0.0160980290 -0.0075623489 -0.0248110755 -0.0122656127 -0.0076588119 -0.0247291221 -0.0089688554 -0.0034752463 -0.0123705644 -0.0095470246 -0.0015212802 -0.0007286427 -0.0005301190 0.0015088191 -0.0006124867 -0.0061329231 0.0035221379 0.0013286894 -0.0173210400 0.0064444958 0.0047617771 -0.0080232011 0.0073682862 0.0013272626 -0.0207303350 0.0067615689 0.0037399298 0.0072474226 -0.0000902867 -0.0037796181 -0.0079740424 -0.0010967427 0.0062443983 0.0049741599 -0.0039035109 -0.0018367447 0.0050389681 -0.0087958291 -0.0046466198 0.0224909897 -0.0020051167 -0.0044553252 -0.0032078156 0.0343228886 0.0377382387 -0.0472620570 -0.0011471912 0.0370427251 -0.0339209266 0.0133655775 0.0283285210 0.0147679400 0.0407590691 0.0057030242 -0.0093937919 0.0041771580 0.0116536732 -0.0388069857 0.0380223986 0.0282271007 -0.0146721910 0.0565737798 0.0168923613 0.0133517616 0.0264743888 0.0000810243 -0.0065907912 -0.0228722352 0.0048045111 -0.0559097955 0.0451355914 0.0376911270 -0.0171694936 0.0828143015 0.0225895855 0.0139106939 0.0220217843 0.0153050233 -0.0046986871 -0.0257115544 -0.0057430878 0.0146975073 -0.0381669475 -0.0375134863 -0.0315009791 -0.0350480836 -0.0299659846 0.0620908356 -0.0217319929 0.0315349996 -0.0295195783 -0.0128320837 -0.0283762927 -0.0101276165 -0.0515700013 -0.0497046800 0.0431514618 -0.0436177543 -0.0110600585 0.0176751125 0.0000145839 0.0026587491 -0.0528614308 0.0001985724 -0.0335814294 -0.0241874370 -0.0680871257 -0.0792066583 0.0663821448 -0.0567644839 -0.0069330549 0.0253111639 0.0276960178 0.0216766654 0.1047572143 -0.0173026020 0.0795933955 0.0282130428 0.0226409829 -0.0160382469 0.0282123402 0.0097372203 -0.0169971261 -0.0020598642 0.0084325400 -0.0013659786 -0.0044372581 -0.0111181029 -0.0159438859 -0.0087118848 -0.0091468185 -0.0131606205 -0.0089185818 -0.0111593364 -0.0156001810 -0.0197535240 0.0092709280 0.0225251560 -0.0071281828 0.0315379570 0.0635344468 -0.0913626695 -0.0396804350 -0.0109134380 0.0550840084 -0.0056447966 0.0386558405 0.0029859032 -0.0072437534 0.0008858339 0.0147047242 0.0353160936 -0.0639097624 -0.0131345865 -0.0182696297 0.0967436477 -0.0058576928 0.0544959761 0.0289375033 0.0074215818 0.0759788423 0.1038171443 -0.1812357120 -0.1050703263 -0.0504427191 -0.1222511777 0.0546498509 -0.0482720159 -0.0410877700 -0.1140475041 0.0377640003 0.1159412014 0.0623032658 0.0813664463 0.0984991260 -0.0912337183 0.0271514267 0.0518502842 -0.0155933597 0.0338766541 -0.4184882222 0.0145986480 -0.1974612592 0.1628580601 -0.1503436997 0.3137934966 0.3162535868 0.2679628313 -0.3471032119 0.0029467843 0.0035534421 0.0088338712 0.0061601582 0.0002328030 0.0099326489 0.0105485633 0.0033826433 0.0091457337 0.0162763311 0.0061532455 0.0072032997 0.0150493188 0.0125462671 0.0057672013 0.0137631532 0.0096204185 0.0057342011 0.0066862675 -0.0039706989 0.0148689595 0.0073779326 0.0036336365 0.0130340977 0.0153171445 -0.0047559693 -0.0031516169 0.0153842258 0.0175093149 0.0011150284 0.0189297361 0.0098618950 0.0004912971 0.0014793361 0.0069604346 0.0007567960 0.0067141287 0.0010152927 0.0014695595 0.0119436060 0.0001068505 0.0017182379 0.0099452701 0.0008969671 -0.0000566479 0.0054801066 0.0070478224 -0.0007097071 0.0010091105 0.0104284163 -0.0005374474 0.0058678449 -0.0021337762 -0.0007070707 0.0117207554 0.0033277002 0.0048210790 0.0102092573 -0.0015853976 0.0007418294 0.0064648282 0.0108056090 0.0016514218 -0.0000636631 -0.0075619098 -0.0061767067 0.0274504759 -0.0140165847 -0.0108929804 0.0080051167 0.0001040459 0.0067264867 0.0137241007 0.0095674219 0.0071103169 -0.0143765923 -0.0070314317 -0.0289544883 -0.0148826888 -0.0089211940 -0.0329522053 -0.0119629906 0.0095364602 0.0037891937 -0.0077938499 0.0199785648 0.0269344316 -0.0118826424 0.0168545717 0.0220014013 -0.0015166209 0.0355289075 0.0657450843 -0.0158457431 -0.0088771751 -0.0382341180 -0.0117819787 0.0070522159 -0.0064663507 -0.0188091187 -0.0141460901 -0.0514673602 -0.0088735214 0.0119837469 -0.0009401960 -0.0168544116 0.0062779327 0.0071761986 -0.0154004523 0.0026277219 0.0027793338 -0.0214345243 0.0043073440 0.0147650610 -0.0134027566 -0.0091706622 0.0083253777 -0.0262129482 0.0091959791 0.0215686091 -0.0140935453 -0.0121321661 0.0141795933 -0.0017939893 -0.0145961602 -0.0093973864 0.0039730994 -0.0212047704 -0.0085504701 0.0064516872 -0.0229456062 -0.0222123382 0.0199527795 -0.0337260130 -0.0198458712 0.0175339038 -0.0330398494 0.0101405840 0.0581060567 -0.0803701786 0.0446436944 0.0003374700 -0.0527485252 -0.0384799945 0.0147875488 0.0211158174 0.0499613785 0.0061745165 -0.0040143314 0.0021975016 -0.0067539003 0.0001450368 0.0131765099 0.0118697916 -0.0023098578 0.0116575617 0.0208058969 -0.0049883085 0.0005016867 -0.0049397251 -0.0029689264 -0.0349511058 -0.0209959946 -0.0215042113 -0.1017420895 -0.0181600212 -0.0217260734 -0.1023188913 -0.0073583848 -0.0103674261 -0.0353825323 -0.0025985597 0.0029671692 -0.0195269825 -0.0010590647 0.0024496785 0.0469904981 -0.0154513952 0.0192250582 0.0401110302 -0.0268813456 0.0056140703 0.0445515748 -0.0055381801 -0.0041197634 0.0300713888 -0.0134977761 -0.0016068119 0.0381501622 0.0128961548 -0.0135295083 0.0404817417 0.0005633141 0.0132485940 0.0029836636 0.0201312068 -0.0058465397 0.0109625551 0.0021171210 0.0283827257 0.0113693054 0.0556426968 -0.0468692170 -0.0079515793 -0.0245855967 0.0164473573 0.0088310393 -0.0172625327 -0.0016041507 -0.0063929369 -0.0085111563 0.0005850753 -0.0018596334 0.0065974348 0.0155031270 -0.0051953522 -0.0130765704 0.0033439408 -0.0230543313 0.0098980721 -0.0007300956 0.0318519643 0.0167360159 0.0088318884 0.0214305435 0.0072486543 0.0080862567 -0.0096500460 -0.0217644852 0.0008209233 -0.0411111704 0.0149027590 -0.0043865722 0.0577667093 0.0282301307 0.0103449290 0.0417988187 -0.0149010434 0.0085495377 -0.0078216281 -0.0272882714 -0.0077456956 -0.0178487897 -0.0177252799 -0.0153692642 -0.0253029293 -0.0343859882 -0.0105647836 -0.0176729846 0.0082687574 0.0062460429 -0.0031853063 -0.0356118361 0.0074905825 -0.0192418416 -0.0162325511 -0.0206658159 -0.0124071994 0.0067347945 -0.0129477697 -0.0058895039 -0.0131396338 0.0176997350 -0.0120865314 -0.0514985924 0.0158813322 -0.0231769510 -0.0135149928 -0.0322408447 -0.0081088486 0.0234429974 -0.0221929847 -0.0024341388 -0.0145197687 0.0345786080 -0.0144553851 0.0254635948 0.0122732934 0.0039948793 0.0376214943 -0.0031898765 -0.0071824022 0.0366213759 -0.0267800518 -0.0134563593 0.0125121844 -0.0094022064 -0.0173058702 -0.0194989997 0.0088417115 -0.0043373966 0.0018203162 -0.0048890634 0.0169984507 0.0045230094 -0.0069599153 0.0038362227 0.0095674969 -0.0087032731 -0.0016641704 0.0001793032 -0.0172613766 -0.0083250542 0.0311307132 0.0203220844 0.0157034961 -0.0111442868 0.0107371637 -0.0206526358 0.0163974044 -0.0211616214 0.0475885886 -0.0013470821 -0.0125562498 0.0297963306 -0.0517872597 -0.0447704445 0.0008141329 0.0250284420 -0.0242547640 -0.0756068697 0.0318887083 0.0171566816 0.0319895428 0.0240139601 0.0165580496 0.0240575372 0.0312224317 0.0356448274 0.0533913722 0.0624198951 0.0414100530 -0.0103610755 -0.0398074180 -0.0206998681 -0.0385011554 -0.0284708985 0.0489642214 -0.0436259166 0.0092793097 0.0323822005 -0.0068188696 0.3778867663 -0.0379401920 0.0913995726 -0.1328412540 0.1733992714 -0.3079252394 -0.2679537206 -0.1620936899 0.2789488831 0.0086300602 0.0191000373 0.0215540369 0.0040609103 0.0150870203 0.0341758784 0.0151774358 0.0244309468 0.0411650047 0.0250797816 0.0281974753 0.0377673476 0.0259650584 0.0304571019 0.0381152110 0.0267974683 0.0236592314 0.0263669329 -0.0031235982 0.0078184879 0.0390723343 0.0070111570 0.0277955155 0.0500570662 0.0126606796 -0.0070336146 -0.0061721160 0.0315548640 0.0334246460 0.0384276982 0.0382742682 0.0213476235 0.0161245655 0.0008710658 -0.0079928484 -0.0337837988 0.0028640599 0.0040418899 -0.0487653944 0.0051084124 0.0061978656 -0.0478057682 0.0126928120 0.0063987526 -0.0422887017 0.0165202892 -0.0005083081 -0.0250390512 -0.0099155397 -0.0141813678 -0.0310202841 -0.0025613153 0.0063074911 -0.0557557385 -0.0096242615 -0.0035373639 0.0006397044 0.0216292064 0.0119364968 -0.0459956999 0.0218520211 0.0001984660 -0.0191153233 -0.0495319536 -0.0112412648 -0.0227768100 0.0599923648 -0.0432673391 -0.0357744195 -0.0554460968 -0.0310943266 0.0151508825 0.0210553459 0.0097774756 0.0430106329 -0.0237496920 -0.0230683103 -0.1035244595 -0.0232768839 -0.0327506693 -0.1168278962 -0.0116761327 0.0412731867 0.0243779228 0.0049108117 0.0773345336 0.0910623955 -0.0110719805 0.0735481291 0.1043881823 0.0263084737 0.1383765376 0.2335926482 -0.0240574621 -0.0329740898 -0.1536312431 -0.0107780694 0.0225804773 -0.0516013031 -0.0341818121 -0.0536184628 -0.2039151815 -0.0028129696 0.0345887012 -0.0503319998 -0.0452759597 0.0311013744 0.0626125780 -0.0342290561 0.0138103702 0.0475724358 -0.0546212783 0.0254747366 0.0836927387 -0.0160098868 -0.0149779862 0.0586283902 -0.0742772898 0.0402739658 0.1006986386 -0.0146241716 -0.0233382962 0.0706121957 0.0238946190 -0.0346135091 0.0062519064 0.0476020503 -0.0550320050 0.0040707365 0.0614433806 -0.0626670449 -0.0327373560 0.1084589918 -0.0979943403 -0.0377854753 0.0033228109 -0.0092483149 0.0479346628 -0.0511358261 0.0082593268 0.0374403373 0.0068416889 -0.0245204180 0.1282311751 0.0783174442 -0.0276833126 0.0208785238 -0.0275855279 0.0260674298 -0.0471635652 -0.0019686014 0.0175492335 -0.0683129867 -0.0476667967 0.0415545016 -0.0491557690 -0.0347267442 0.0329659282 -0.0540011180 -0.0014471184 -0.0024749116 0.0192333565 0.0042777335 0.0075663867 0.0514574920 0.0028532766 0.0048793378 0.0444446049 0.0021930006 -0.0069832036 -0.0026601376 0.0016411724 -0.0077616680 0.0032319833 -0.0044624002 -0.0112546017 -0.0325605520 -0.0059434841 -0.0151907069 -0.0289708628 -0.0274825047 0.0036399299 -0.0090978361 -0.0103891614 0.0046234764 -0.0149836529 -0.0435179944 0.0102286001 -0.0052004530 -0.0125793117 -0.0120724315 -0.0279246879 0.0059734238 -0.0147246803 0.0044866597 -0.0041339964 -0.0011459238 -0.0008677927 -0.0026098787 0.0067099599 0.0060142554 0.0042204619 0.0155210888 0.0021136568 0.0208083161 0.0162267593 0.0328329254 -0.0486590786 0.0020073848 -0.0041330852 -0.0283750305 0.0075610349 0.0055527860 0.0240200005 0.0191407675 0.0156738268 -0.0048155106 -0.0020163715 0.0009746062 -0.0219866701 0.0207660709 0.0225844819 0.0039112939 0.0300623630 0.0270208758 0.0224966188 0.0080849977 0.0113596612 -0.0087412020 -0.0190545301 -0.0143312662 -0.0343439599 0.0259130346 0.0307811393 0.0090634753 0.0453153717 0.0417656458 0.0246134856 0.0126937785 0.0156230001 -0.0040769019 -0.0067822797 -0.0182938507 0.0071358080 -0.0135029487 -0.0456334625 -0.0270462278 -0.0095759232 -0.0476433265 0.0283338992 -0.0108484134 0.0173707328 -0.0341964107 0.0010981303 -0.0677303780 -0.0140834397 -0.0178597748 -0.0446753065 0.0201975020 -0.0190494444 -0.0001731235 -0.0072166199 0.0043955294 -0.0374468203 -0.0528887371 0.0089094555 -0.0938569081 -0.0218808580 -0.0240543211 -0.0603403179 0.0378589541 -0.0262897893 0.0224616950 -0.0119084945 0.0186469253 -0.0480307906 0.0559876587 -0.0126181380 0.0620065304 0.0332192992 0.0025742136 0.0131672217 0.0355250009 0.0000705561 0.0018570983 -0.0050464873 0.0095008377 0.0043631547 -0.0111259008 0.0094034621 -0.0202460185 0.0073163100 -0.0077972188 0.0064867547 -0.0042785529 0.0084588797 -0.0353252092 -0.0128791102 0.0184808375 -0.0017336038 -0.0281072633 0.0286534244 0.0677085999 -0.0647494527 -0.0457003748 -0.0393914404 0.0263293164 -0.0343372505 0.0493470816 0.0420711164 -0.0359260439 0.0720948379 0.0510901480 -0.0032014584 0.0198832227 -0.0759825933 -0.0762144814 0.1318322952 -0.0035822600 0.0392174178 -0.0218620723 -0.0088687335 0.1361981760 0.1572835618 -0.1328343499 -0.0973163713 -0.0894597601 -0.0887226069 0.0214691850 -0.0795670714 -0.0308605442 -0.1245390330 0.0176271104 -0.0058235387 -0.0345538607 0.1700400270 0.0216343171 -0.0196538296 0.0130629980 0.1145369878 -0.1174756812 0.0322808170 0.4893563281 -0.0550027997 0.0627353506 -0.0920638557 0.2381140297 -0.3520603482 -0.2408495650 -0.1636561371 0.2926840079 -0.0050991549 -0.0090837183 -0.0011020590 -0.0002063288 -0.0057206187 -0.0097270476 -0.0024009802 -0.0046833489 -0.0196559543 -0.0069079907 -0.0043784801 -0.0203200543 -0.0085081501 -0.0035992393 -0.0198159459 -0.0105475015 -0.0051438042 -0.0085399620 0.0036376168 -0.0051865838 -0.0087481683 0.0022589258 -0.0065356392 -0.0244156275 -0.0032281839 0.0031177344 0.0009356215 -0.0111788373 -0.0014288932 -0.0234551033 -0.0160470568 -0.0030884258 -0.0040050014 0.0094184285 0.0103660460 0.0194149651 0.0128812063 0.0041572595 0.0277988781 0.0203511069 0.0072128081 0.0265694887 0.0097392226 0.0066096651 0.0168560450 0.0042590084 0.0114671323 0.0070591272 0.0194830289 0.0173946682 0.0160465599 0.0120605094 0.0004835113 0.0258106548 0.0309043506 0.0148879823 0.0107205851 -0.0008448656 0.0037591372 0.0195251224 0.0034180674 0.0186024142 0.0088369639 0.0212557268 0.0004822999 0.0104243413 -0.0230967487 0.0141718001 0.0151777811 0.0490699815 0.0262819585 0.0049716802 0.0209788507 0.0118826385 -0.0033279433 0.0042685811 0.0032539169 0.0351152628 0.0078341730 0.0027881418 0.0313555869 -0.0026608652 -0.0137234866 -0.0092508521 -0.0057643178 -0.0219296394 -0.0334039946 -0.0069721512 -0.0238302018 -0.0346270249 -0.0147870339 -0.0391057638 -0.0824539514 0.0117429983 0.0092428097 0.0495889357 0.0055271843 -0.0025533103 0.0182925352 0.0186749648 0.0171715251 0.0700830704 0.0066008855 -0.0004920796 0.0226526435 -0.0199436500 -0.0127767932 -0.0257886454 -0.0251905246 -0.0035442529 -0.0157314216 -0.0240994274 -0.0083412404 -0.0322311296 -0.0141700625 -0.0084016060 -0.0394866938 -0.0304583135 -0.0075632065 -0.0309037604 -0.0090946415 -0.0088997600 -0.0461521028 -0.0267081575 -0.0011872956 -0.0171753581 -0.0135751039 -0.0051030134 -0.0333358847 -0.0332999507 0.0041525180 -0.0097720678 -0.0054455545 -0.0023967577 -0.0371146792 0.0148001354 -0.0117898082 0.0299466807 0.0023916843 -0.0292530233 0.0443455798 0.0086016167 -0.0287594677 0.0501317218 0.0559499603 0.0091562310 0.0376312943 -0.0127369322 0.0264075606 -0.0478658837 0.0008651025 0.0225459748 -0.0589160255 -0.0243413018 0.0372349882 -0.0447364208 -0.0114480556 0.0304040021 -0.0525278804 0.0001699069 0.0081928501 -0.0052819559 0.0002431649 0.0162786448 0.0122258835 0.0008399321 0.0162383937 0.0120999336 -0.0112725347 0.0140426177 0.0084679034 -0.0097089104 0.0092230557 -0.0053297500 -0.0041205065 0.0082400865 -0.0055284774 -0.0019942900 0.0069360074 -0.0066328736 0.0183941906 -0.0043404120 -0.0223750779 0.0027171344 0.0025114316 -0.0108573324 0.0229841137 -0.0062531050 -0.0238187344 -0.0090137200 0.0135430540 -0.0016323054 -0.0151413575 0.0152179556 -0.0139493608 -0.0142333638 -0.0018891415 0.0140543273 0.0038984572 -0.0139958757 0.0280153272 -0.0359334910 -0.0171124013 0.0130388844 0.0329352412 0.0356928287 0.0843187931 -0.0900988442 0.0167634660 0.0601166399 -0.0662538422 0.0354538586 0.0545348854 0.0211274135 0.0557889858 0.0244968560 -0.0247659287 0.0201900615 0.0281087798 -0.0681082182 0.0620252535 0.0617996857 -0.0287575602 0.0837578194 0.0512826632 0.0125443246 0.0473336883 0.0200201738 -0.0236811605 -0.0222593265 0.0117623596 -0.0886818893 0.0706702948 0.0741071813 -0.0278986417 0.1231157211 0.0666084304 0.0383156564 0.0281606125 0.0372824410 -0.0159897756 -0.0312072098 -0.0477076852 0.0301892253 -0.0633124632 -0.0843999505 -0.0334101099 -0.0665852769 -0.0638316728 0.0806816344 -0.0767527833 -0.0040382330 -0.0227343464 -0.0616032996 -0.0524383301 0.0048008707 -0.0955636015 -0.0897398465 0.0566991623 -0.0908927730 -0.0590619287 0.0345881639 -0.0511878478 -0.0113259881 -0.0380796753 -0.0530790736 -0.0596852920 -0.0019611918 -0.1176304097 -0.1070008777 0.0713916379 -0.0999069103 -0.0591397987 0.0484707928 -0.0164469974 0.0228501815 0.1255855887 -0.0709906397 0.0430214076 0.0190641529 0.0443993513 0.0196207598 0.0245839491 0.0288457995 0.0159391428 -0.0036739730 0.0017356306 0.0036543363 -0.0295488041 0.0089377750 0.0194136355 -0.0297340080 -0.0062109950 0.0337025885 -0.0033654470 -0.0251297601 0.0269316976 0.0149796815 -0.0567030010 -0.0028936195 0.0540875729 -0.0528088429 -0.0839612418 0.1321574915 0.0986326132 0.0875804811 -0.0244569767 0.0503414386 -0.1077880410 -0.0202813240 0.0009839728 0.0503579410 -0.0329405934 0.0207666104 0.0176640465 0.0779396423 0.0428500967 -0.1458102048 0.0350908350 -0.0329271610 -0.0504513230 0.0874877768 -0.1513201943 -0.1424548628 0.1438735848 0.1134570128 0.1501452639 0.1450365362 0.1227457484 0.2541145329 0.2275318738 0.2331600554 -0.0502213251 -0.0047510797 0.0258667374 -0.2808895585 -0.0267735496 0.0581266734 -0.1287841169 -0.0933520234 0.2112110641 -0.0524344480 0.0006233263 0.0013375795 0.0009430420 -0.0481498450 0.0436986263 -0.0210041035 -0.0624974806 0.0340883428 0.0446527584 0.0003284532 -0.0006730254 -0.0103859366 0.0026434855 -0.0036857240 -0.0106859417 -0.0005628068 -0.0126018207 -0.0018256338 0.0020168929 -0.0183923891 0.0047113157 -0.0024998403 -0.0239710912 0.0107298634 -0.0017349062 -0.0167906215 0.0041872159 0.0086696139 0.0051388695 -0.0183926322 -0.0016560152 -0.0088394368 -0.0024570059 0.0091065599 -0.0035964958 0.0017709262 -0.0084162240 -0.0343819910 0.0184735209 -0.0020029820 -0.0263298382 0.0081814796 0.0020823624 -0.0040468703 0.0104925544 -0.0005028752 -0.0072435929 0.0170195887 -0.0030999715 -0.0100343476 0.0170619414 -0.0072510212 -0.0063523412 0.0142238873 -0.0097195045 0.0008775009 0.0056175020 0.0068812146 -0.0038108508 0.0101281698 0.0011224292 -0.0036257807 0.0207456964 0.0007118486 -0.0066062508 -0.0011165497 -0.0108521348 -0.0074075472 0.0151295635 -0.0156423995 0.0047503047 0.0001561638 0.0173493552 0.0046104592 -0.0014000562 0.0059387989 0.0058331332 0.0005421370 0.0173552811 0.0005182606 -0.0049506693 -0.0110240208 -0.0075128173 -0.0180797792 -0.0007124080 0.0159874262 0.0193424911 -0.0088725839 0.0199303194 0.0257560073 -0.0001746109 -0.0043315011 -0.0054048352 -0.0087272438 -0.0190417990 -0.0160274997 0.0060632974 -0.0122289104 -0.0243500620 -0.0099711229 -0.0386783451 -0.0449567498 -0.0147701917 0.0130343522 0.0345723918 -0.0144334354 -0.0066738187 0.0142812554 -0.0188325319 0.0168198435 0.0421826097 -0.0204154348 -0.0155804221 0.0141151507 0.0173675060 -0.0030937670 -0.0190345913 0.0161471737 -0.0028826480 -0.0214151289 0.0272461837 -0.0090192889 -0.0230190410 0.0072762794 -0.0009499398 -0.0114966778 0.0425700335 -0.0144508094 -0.0271615966 0.0090981260 -0.0023376203 -0.0119066992 -0.0106203335 0.0085322759 -0.0051799915 -0.0239465909 0.0137217119 0.0057604329 -0.0272930851 0.0161553386 0.0029004533 -0.0533831794 0.0263235684 0.0241414845 -0.0201053924 -0.0108546975 -0.0442832494 0.0028793909 0.0252574718 -0.0734827021 -0.0264904914 -0.0217814181 -0.0445403131 -0.0380675214 -0.0503138459 -0.0697813880 -0.0074207765 0.0975756661 -0.0151792360 0.0577064948 0.1502201449 -0.0412011489 -0.0860549407 0.1460804338 -0.0415433085 0.0432525866 0.0844076180 -0.0082224689 0.0180322473 -0.0236504661 0.0230603142 0.0642892480 -0.0147480642 0.1145596273 0.0421535063 -0.0294288289 0.0749278216 0.0727329509 -0.0707866109 -0.0524408503 0.0723365284 -0.0532471524 -0.0305588230 -0.0096091627 -0.0635533790 -0.0276060972 -0.0127740520 -0.0595973382 -0.0377066929 -0.1299548234 0.0112062600 0.0826888416 -0.0290392184 -0.0179639970 0.0237109860 -0.1695361980 0.0286714095 0.0947070785 -0.0482104672 -0.1056600718 -0.0167913806 0.0971574229 -0.0727337236 0.0120425712 0.0105308149 -0.0107933836 0.0143924091 -0.0283958601 0.1012591571 0.0422870269 0.0123826815 0.0029364979 0.0189686693 -0.0150076766 0.0021184787 -0.0055025379 0.0046275185 -0.0020302409 0.0121640531 -0.0005136569 0.0001761957 0.0047031359 -0.0096283256 0.0046418853 -0.0108417089 -0.0047752721 0.0026576957 -0.0017002249 -0.0021634471 -0.0000401200 0.0013379011 -0.0080605930 0.0035690689 -0.0086839753 -0.0070216950 0.0056189816 -0.0075852111 -0.0034145370 0.0016586928 0.0002977083 0.0018860845 -0.0022053111 0.0065308626 -0.0105568329 0.0058453469 -0.0121894264 -0.0127810406 0.0002730544 -0.0073172756 -0.0066902221 -0.0046947343 -0.0020509767 -0.0025441876 -0.0084642433 0.0063228198 0.0039860252 -0.0100703882 0.0157862218 0.0037292239 -0.0016849593 -0.0188689158 0.0102612947 -0.0073085119 0.0307490578 0.0087103418 -0.0139152056 0.0077523001 0.0047921943 -0.0083971144 -0.0156250884 0.0107609868 -0.0022328033 0.0157039107 0.0128602109 -0.0068318224 0.0477464760 0.0122682733 -0.0200849391 0.0146816929 0.0000261784 -0.0080448227 -0.0285608403 0.0153162577 0.0022575998 0.0266576350 0.0001443361 0.0041422614 -0.0409757657 -0.0028501122 0.0047269344 -0.0098049041 -0.0022272125 0.0013125129 0.0108453100 0.0153751160 -0.0085137735 -0.0078535204 -0.0048351630 -0.0061169123 0.0185433652 -0.0168414266 -0.0060189913 0.0151359982 0.0031044606 -0.0316079701 0.0443323070 0.0032552365 -0.0270044826 -0.0199832401 0.0130652172 -0.0221666345 -0.0227136041 0.0266547220 0.0705444262 0.0246638878 -0.0169469249 0.0019687965 -0.0493167954 -0.0286196881 0.0215857282 -0.0137187311 -0.0100853096 0.0199311837 -0.0059678745 0.0707010500 0.0261170910 -0.0438429489 -0.0146960057 -0.0202525725 0.0598077921 -0.0291503011 -0.0696444429 -0.0779875722 0.0727940289 0.1101077612 0.1023116862 0.0435759487 0.0353439338 0.0730662616 0.0149609163 0.1638503288 -0.0497199143 0.0109294550 0.0099114440 -0.1234708105 -0.0102656274 -0.0157303046 -0.0189529623 -0.0806058734 0.0506945536 -0.0419652748 -0.1838283323 0.0293760003 -0.0372434850 0.0527479342 -0.0596776634 0.1546590441 0.1175656995 0.0870584906 -0.1254653015 -0.0184288121 -0.0145618503 0.0086950367 -0.0310012232 0.0406170607 -0.0147083477 -0.0292811592 0.0774360707 -0.0530431016 -0.0657606572 0.0707963198 -0.0542577275 -0.0506078164 0.0420619027 -0.0527950995 -0.0553204418 0.0102911429 -0.0204682173 -0.0489009458 0.0456216199 -0.0274979245 -0.0049065822 0.0839002303 -0.0845409701 -0.0925741583 0.0380189095 0.0033469517 -0.0339472791 0.0426734093 -0.0462820494 -0.0830118736 0.0197153811 0.0038031895 0.0242712102 0.0109670093 -0.0053604687 0.0326545482 0.0332126264 -0.0228345185 0.0561897201 0.0624207545 -0.0286224857 0.0446610689 0.0593117740 -0.0420335273 0.0479250697 0.0294825787 -0.0210403831 0.0302867322 0.0118289772 -0.0070939836 0.0205370088 0.0190984864 -0.0439916027 0.0676616601 0.0430112900 0.0286294482 0.0326541624 0.0711489201 -0.0447037630 0.0651631226 0.0422767573 0.0034546820 -0.0733060874 0.0091425015 0.0300035001 -0.1272097787 0.0246631929 0.0418680386 0.0398491749 0.0092816311 0.0475971729 0.1008591373 0.0429651873 0.0756786531 0.0560807769 -0.0363768493 0.0415642838 0.0943417708 -0.0593314779 -0.0007673497 0.0395047721 -0.0098012392 0.0108792941 0.0599429773 0.0093166070 -0.0594644394 0.0068012908 -0.0026680927 0.0251957088 0.0348304207 0.0296420775 -0.1086795341 0.1321424677 -0.0137503153 0.0069437790 0.1105958152 0.0142029258 -0.0378605931 0.1680266292 -0.0044816730 0.0411781158 0.1300944563 0.0417162451 -0.0507624629 -0.1231198737 -0.0174876178 0.0236884523 -0.1286604760 0.0037665033 0.0626286028 -0.1675176359 0.0130316862 0.0231318721 -0.0532073799 -0.0216072561 -0.0457770188 -0.2453977788 0.0380086827 0.0456084718 -0.0420137318 -0.0186012359 -0.0670278575 -0.0233763392 -0.0334712243 -0.0055237662 0.0720931432 -0.0690183415 -0.0953881008 0.0241922901 -0.0487444191 -0.0168402411 0.2143024881 -0.1139339469 -0.1809027621 -0.0071100936 -0.0103917129 -0.0232622743 0.0562609059 -0.0363485574 -0.0067534153 -0.0200357109 -0.0128569133 -0.1028885303 -0.0659368557 0.0184105279 0.0084341509 0.0103604423 0.0283365178 0.0240414865 0.0244581208 0.0476106403 0.0214803740 -0.0137512551 0.0472024738 0.0198060405 0.0372456585 0.0245798409 0.0229130732 -0.0026614138 0.0020954991 0.0040654246 -0.0053569296 0.0043870928 0.0048636964 -0.0035769193 0.0048782230 0.0063320478 -0.0062001587 0.0044531113 0.0014088642 -0.0064913770 0.0033650254 0.0042602419 0.0050083207 -0.0009471176 -0.0138732307 0.0002094117 -0.0000654240 -0.0090745580 -0.0030712314 0.0025353570 -0.0108205872 -0.0010955072 0.0030833463 -0.0105922944 -0.0077289693 0.0050294058 -0.0087139935 0.0099543163 0.0044808049 -0.0136397489 -0.0061993327 0.0018559056 0.0021062278 0.0044986170 -0.0030657651 0.0006289662 0.0141221831 -0.0131944823 0.0051217612 0.0128104747 -0.0026616985 -0.0008670212 0.0522514039 -0.0311840370 0.0449524397 0.0326967772 -0.0252545292 -0.0191342454 0.0307807311 -0.0255041072 -0.0203258722 0.0173339041 -0.0141157422 -0.0062648217 0.0233155526 -0.0234528243 -0.0154733151 0.0286611949 -0.0198759154 -0.0220613139 0.0265938341 -0.0199664666 -0.0182521231 0.0185902247 -0.0224591006 -0.0159713746 0.0226628811 -0.0157836125 -0.0137692935 0.0260525760 -0.0187933921 -0.0212558737 0.0330738256 -0.0302298770 -0.0092588795 0.0264148846 -0.0161359062 0.0222980128 0.0053217983 0.0145474961 0.0149643377 -0.0299800236 0.0444768714 -0.0208247394 0.0058228667 0.0396216091 0.0064911051 -0.0353380174 0.0407859094 0.0244180622 0.0005513322 0.0388885171 0.0018546349 -0.0161002600 0.0568339890 0.0180259810 -0.0338165727 0.0510435015 0.0277328704 -0.0185249409 0.0294077940 0.0078984252 0.0066826391 0.0347195897 0.0007594802 -0.0184002284 0.0758868320 0.0134397616 -0.0394426437 0.0552473271 0.0316288237 -0.0210858285 0.0086766022 0.0013866556 -0.0464155614 0.0335052957 0.0299200103 0.0274001046 -0.0260527825 -0.0311519414 0.0285715375 -0.0287916188 -0.0258739260 -0.0030713935 0.0034137387 0.0010949725 -0.0466405210 -0.0085605616 -0.0281723485 -0.0330669929 -0.0202874586 -0.0062192344 -0.0076062161 -0.0619059017 0.0197801115 -0.0198304979 -0.0435014638 0.0329416349 -0.0226047043 -0.0514100981 0.0032218084 -0.0406456645 0.0652737578 0.0811014472 0.0099749527 0.0562318923 -0.0624037296 -0.0250066058 0.0112246845 -0.0131182746 0.0459324859 0.0246099105 -0.0199225108 -0.2125449202 -0.1704377708 0.0490227438 0.0658015261 -0.0553581275 -0.2650739974 0.1177385125 0.0822903488 0.1683332765 -0.0698748089 0.0543832431 0.1729826349 -0.0506020211 0.1192289633 0.1187367492 -0.0109047961 0.1509383377 0.0019496008 0.0678771992 0.0786440013 -0.1916187220 0.0387821696 0.0067538989 -0.1194126604 -0.0339933946 0.2157688838 -0.0020632110 0.0082604999 0.0098647889 -0.0480116933 0.0785116862 0.0447474444 0.0562249830 0.1094764320 0.0260062425 -0.0791838147 -0.0001928132 -0.0004674410 -0.0021620461 0.0064668657 0.0023782771 -0.0092649238 0.0060049252 0.0011059530 -0.0109207076 0.0047621358 -0.0043113121 -0.0059771963 0.0004812549 -0.0061272440 -0.0012308364 -0.0007434783 -0.0053293576 0.0016515465 0.0114562070 0.0058963335 -0.0115316432 0.0079187689 0.0051759394 -0.0150138440 0.0077354294 -0.0020852540 -0.0019146589 -0.0044141251 -0.0101255770 0.0006178330 -0.0025484692 -0.0107500378 0.0055650855 0.0038640108 -0.0010927106 0.0089161617 0.0021962067 -0.0028035158 0.0150793764 0.0020781714 -0.0050027494 0.0151871033 -0.0015773448 -0.0055764811 0.0121095850 -0.0043954946 0.0010653817 0.0036763830 0.0099220105 -0.0004425740 0.0083404094 0.0020298389 0.0000492942 0.0162135701 0.0054277877 0.0013913193 0.0010797373 -0.0057847156 -0.0083481985 0.0138253284 -0.0083852368 0.0042253891 0.0003197002 0.0149387940 -0.0004328522 -0.0005555345 0.0030500996 0.0011101516 0.0015498965 0.0158789110 0.0154275992 -0.0063872580 -0.0018901134 -0.0038559820 -0.0086186744 -0.0043624140 0.0049470024 0.0058317852 -0.0071054169 0.0064115972 0.0072221135 -0.0043112656 -0.0031184375 -0.0035070327 -0.0076115398 -0.0080876839 -0.0036309543 -0.0014970563 -0.0065745736 -0.0117821089 -0.0075621309 -0.0152993750 -0.0127457235 -0.0100968789 0.0033944431 0.0128964718 -0.0094661262 -0.0029607733 0.0093336749 -0.0125426036 0.0048756261 0.0156743479 -0.0110427670 -0.0049490041 0.0126781928 0.0000546844 -0.0010306644 -0.0112948312 -0.0022399608 0.0000755193 -0.0119310354 0.0010350009 -0.0020681952 -0.0123248149 -0.0025987048 -0.0024111967 -0.0111670270 0.0042983911 -0.0030360599 -0.0125020068 -0.0008443013 -0.0041014337 -0.0109692640 -0.0095941646 0.0009992255 -0.0089486235 -0.0103172029 0.0005457794 -0.0080941983 -0.0149905811 0.0029856746 -0.0072831410 -0.0157372696 0.0024248388 -0.0048292199 0.0439485356 -0.0915903393 0.1273581862 0.1598346449 -0.2865092254 0.2722473888 -0.0181888188 -0.1708621824 -0.0224032965 0.0756350322 0.1324797851 0.2846140011 -0.0450549848 0.0661648332 -0.1055330324 0.0009511290 0.0401070063 -0.1484606346 -0.0982022963 0.1251927038 -0.0862431537 -0.0285407139 0.0953400961 -0.1464136404 -0.0023107533 -0.0044205931 -0.0015428161 -0.0054779685 -0.0081289159 -0.0150786617 -0.0039089822 -0.0064043610 -0.0104239577 0.0013954627 0.0004062224 0.0054648525 -0.0000063073 -0.0015689841 0.0051462474 0.0037302674 0.0039723862 0.0064933447 0.0051852833 0.0024693182 0.0092720666 0.0089733818 0.0015910440 0.0027068937 0.0030786076 0.0010866792 0.0038737312 0.0115022854 0.0004856715 0.0021798804 0.0108616429 0.0058059308 0.0018868612 0.0007864293 -0.0036315203 0.0031852273 0.0048405254 0.0030447072 -0.0127634316 -0.0046591102 -0.0023141927 -0.0296537303 0.0138074436 0.0153303887 -0.0121723682 -0.0160506943 -0.0022446503 -0.0104253170 0.0087312870 0.0037622182 0.0060703047 0.0019141707 0.0021334041 0.0024184188 -0.0148945979 -0.0028931597 -0.0093571588 -0.0090274980 0.0068921028 -0.0049019361 0.0055200659 -0.0074943613 0.0062638818 -0.0047372400 -0.0089044032 -0.0008740201 -0.0138214498 0.0034973701 -0.0044641169 -0.0098466738 0.0120612040 -0.0041014985 0.0155101913 -0.0121938961 0.0117042000 -0.0055700295 -0.0123410031 -0.0042580631 -0.0157481386 -0.0030856951 -0.0066247673 -0.0081010801 -0.0011260018 -0.0089084268 -0.0054286715 -0.0029135771 0.0022787515 0.0298720030 -0.0207507291 0.0594134258 -0.0228507290 -0.0113182553 -0.0729182725 0.0366704904 -0.0291963127 0.0738512051 0.0391856033 -0.0265702650 0.0691879172 0.0039554234 -0.0171557340 -0.0109370738 0.0096060619 -0.0215786182 0.0091199018 0.0484401445 -0.0328209276 0.0985175363 0.0562533329 -0.0360994241 0.1062553345 -0.0081972594 -0.0135882368 -0.0356945971 0.0046436335 -0.0194976950 -0.0031827701 -0.0617693356 0.0011324041 -0.1648872648 -0.0123386912 0.0020288704 0.0034977283 -0.0121575872 0.0043424525 0.0015760144 0.0007119450 -0.0008175486 -0.0010447780 -0.0179102079 -0.0175386326 0.0270904326 -0.0590709409 -0.0192752587 0.0159062012 -0.0532232348 -0.0031678397 -0.0494803538 -0.0657781329 -0.0223992174 -0.0158430286 -0.0036211928 0.0524984054 0.0716330896 0.0191357965 -0.0044528036 0.0047541940 0.0641339765 -0.0337327503 -0.0065792013 -0.0321495680 0.0246526916 0.0454658514 0.0970083039 0.0617389481 0.0130597647 -0.0019214531 -0.0600637880 0.1513213145 -0.0146191304 0.1670720828 -0.0429116866 0.0886279346 0.1473022067 0.1856872746 0.1070753304 0.0586651529 0.0254049564 0.0490129170 -0.0957360852 0.0404737705 -0.0234077521 0.0561959736 -0.0337218547 0.1191182869 0.0399257795 0.0796670939 0.1154403776 -0.1250639848 -0.0891649277 0.1237214823 -0.0325265515 0.0074352653 0.2271704296 0.0208885002 -0.0062067031 0.0912553156 0.2026718824 -0.0153188887 0.0781709836 -0.0124120469 0.0317113479 -0.0015882750 -0.0025726040 0.0017574802 -0.0028099102 -0.0009225048 0.0028131030 -0.0001728293 0.0037224865 0.0023601099 0.0023791451 0.0059947283 0.0007047027 0.0039218477 0.0051126480 -0.0001911831 0.0021866107 0.0004037652 -0.0000214720 -0.0053527989 -0.0029290575 0.0043278126 -0.0016718282 0.0056061878 0.0032334350 0.0007270225 0.0007822250 -0.0008963590 0.0069494528 0.0072697234 -0.0010566896 0.0038254768 -0.0002121610 -0.0013732048 -0.0023273951 -0.0061420595 -0.0051977728 -0.0030674989 -0.0054836656 -0.0073632741 -0.0047262287 -0.0077342624 -0.0070028984 -0.0026579193 -0.0031477958 -0.0044229798 -0.0036866847 0.0006669485 -0.0025730490 -0.0052280777 -0.0103957761 -0.0033574182 -0.0031785647 -0.0022365105 -0.0063084360 -0.0084142590 -0.0083569908 -0.0039888447 0.0014042823 -0.0020902551 -0.0054375556 -0.0058373024 0.0030830030 -0.0043684309 -0.0050768731 -0.0018035358 -0.0008315479 0.0039694039 -0.0043073681 -0.0018845053 -0.0158063331 -0.0079280844 -0.0047312709 -0.0055163730 -0.0068127511 0.0001791932 -0.0029631501 -0.0039158000 -0.0070469279 -0.0012585314 -0.0028982879 -0.0046682017 -0.0017750077 0.0010509651 0.0037726209 -0.0004689764 0.0038556600 0.0095981188 -0.0012697846 0.0036030362 0.0101185404 0.0013170956 0.0092567529 0.0218578942 -0.0023386416 -0.0050281975 -0.0110116990 -0.0016354010 -0.0016170262 -0.0045220242 -0.0037243133 -0.0071180033 -0.0164468440 -0.0014191515 -0.0015802555 -0.0073482632 0.0101806698 0.0030277617 0.0079937261 0.0112218589 0.0011490012 0.0053709383 0.0104921644 0.0034717853 0.0095042013 0.0060486586 0.0062445334 0.0129770943 0.0116112870 0.0028898101 0.0082497564 0.0026094411 0.0079133986 0.0152477503 0.0119635392 0.0024274100 0.0066322880 0.0061777162 0.0054521504 0.0118181997 0.0146637548 0.0013655669 0.0057647536 0.0023727875 0.0060591604 0.0140197207 -0.0250047912 -0.0354748647 -0.1437362284 0.2305198235 -0.1300216263 -0.0846251958 -0.0760664594 -0.0426717402 -0.4627633535 -0.2693340972 0.0705261544 -0.0224800025 0.0346792216 0.1121870315 0.0250100725 0.0894812604 0.1835905843 0.0132008529 -0.0519962069 0.1733195282 0.0061688424 0.1283879843 0.0961252548 0.0263472966 -0.0003060737 0.0055797221 -0.0015886693 -0.0009212671 0.0053829796 -0.0034637953 -0.0014932526 0.0060319688 -0.0019960178 -0.0054809103 0.0028917835 0.0002350501 -0.0015919617 0.0066768994 0.0002208451 0.0014707025 -0.0069770522 -0.0051628413 -0.0078060435 -0.0002670626 -0.0017602016 0.0002302395 -0.0073242406 -0.0043067348 0.0065548198 -0.0104754152 -0.0076525989 0.0021280156 -0.0082547229 -0.0051823679 0.0019088324 -0.0058176145 -0.0035286051 -0.0007829984 0.0061468853 -0.0005570230 0.0086100029 0.0018852191 -0.0000728997 0.0029728583 0.0110343591 -0.0048267745 0.0235285657 -0.0006316702 -0.0055293350 -0.0717320002 0.0487661470 -0.1138495448 -0.0550659006 0.0284548695 -0.0220914177 -0.0386278027 0.0230882279 -0.0005520603 -0.0213997140 0.0153299536 -0.0177319242 -0.0495880375 0.0318106544 -0.0422738928 0.0139332128 -0.0099720917 0.0859942679 0.0037295528 0.0010700341 0.0559314943 -0.0085315352 0.0151100788 0.0139481072 -0.0699938018 0.0322890954 -0.0809663927 0.0497929405 -0.0289972455 0.1435930136 0.0224546961 0.0025512323 0.0878401087 -0.0457610755 0.0348478550 -0.0761339807 0.0046544896 0.0089206242 -0.0354675418 0.0285392003 -0.0146926759 0.0224930445 0.0402556439 -0.0189360432 0.0164007966 0.0062471740 -0.0426512114 -0.0542741611 0.0515567983 -0.0476812670 0.0297023880 0.0502305209 -0.0260693146 0.0260952713 0.0235385440 -0.0289565667 -0.0152223599 0.0302161864 -0.0510781050 -0.0044216280 0.0736192708 -0.0586276095 0.0401839802 0.0618114956 -0.0294131381 0.0533798493 0.0074861262 -0.0205563767 -0.0208389181 0.0299170002 -0.0540117794 -0.0059739246 -0.0234999173 -0.0399597630 -0.1050579172 0.0282618893 -0.0086616276 0.1143181648 0.0309705234 -0.0177365379 0.0673511683 0.0053811150 -0.0100207257 -0.0011170001 0.0564982733 0.0208156558 0.0042161314 0.0397539175 0.0139298308 0.0063737432 0.0145340186 0.0297524979 0.0684269804 0.0012226076 0.0071534513 0.0032580464 -0.1084320563 -0.0835297678 -0.0260722319 -0.0590059841 0.0079198321 -0.0077839657 -0.0685362630 0.0094068371 0.0032397517 0.0140671634 0.0212307739 -0.0300367416 0.0274455199 0.0106510348 -0.0124405363 -0.4266471605 -0.2923551916 0.0597851307 0.0597241575 -0.1947728834 -0.3998012401 0.0069229831 0.1694221092 0.2164343611 0.0260151200 0.0746708275 0.0785010979 -0.0405816766 -0.1039142579 -0.1215271973 -0.2242270745 0.0481964056 0.0028970280 -0.1184056756 -0.0511279316 -0.0519911683 -0.1128208477 0.0879787166 0.0706084425 -0.1111895388 -0.0034157859 -0.0120393345 -0.0306129334 0.0237422003 -0.0102542436 0.0498924266 -0.0184164160 0.0454058767 0.0720888228 0.0229056888 -0.0541912198 0.0008190232 0.0032267822 -0.0024303727 0.0011544230 -0.0024254331 -0.0000760705 -0.0000859876 -0.0067324125 0.0032693179 0.0018268950 -0.0060788971 0.0029976203 0.0011466250 -0.0026475606 0.0017241134 0.0021494814 0.0016424332 -0.0010688365 0.0026588302 -0.0037027007 0.0018289860 -0.0017080843 -0.0088745618 0.0062838911 0.0045449273 -0.0016506109 0.0007386255 -0.0001930776 -0.0024017571 0.0008686139 0.0038041088 0.0027533400 -0.0032457066 0.0062714892 -0.0001383704 0.0040032876 -0.0027751612 0.0109931625 0.0094505233 -0.0069171547 0.0109392767 0.0097797876 -0.0082651716 0.0015748319 0.0065602195 -0.0004734180 -0.0102075956 0.0004753813 0.0145549299 0.0005759325 0.0032430965 -0.0022359932 0.0168420165 0.0120079406 0.0009234791 0.0055166343 0.0017870411 -0.0157182937 0.0005587935 0.0079739854 -0.0006968250 -0.0181976013 -0.0020980324 0.0061458694 0.0012963606 -0.0007550542 0.0047119834 0.0011627627 -0.0006232008 0.0178226648 0.0102647461 -0.0006901311 -0.0080085091 -0.0048051797 -0.0097012206 -0.0039355228 0.0039684006 -0.0001946674 -0.0063480811 0.0038419424 0.0003214701 -0.0039149428 0.0020359344 -0.0009639849 -0.0054069525 0.0002552503 0.0000431886 -0.0027983938 0.0014555569 -0.0022588223 -0.0046174503 -0.0020307743 -0.0004778731 -0.0081067549 0.0028311116 0.0016471161 -0.0075903567 0.0012382106 0.0019588839 -0.0096655929 0.0031605040 0.0022201126 -0.0083471305 0.0002639640 0.0032200779 -0.0133303558 0.0002620548 -0.0001076438 -0.0109784606 -0.0001137221 0.0003015604 -0.0094620989 -0.0012894967 -0.0053005936 0.0020573290 -0.0059487341 -0.0128253243 -0.0101164105 -0.0018155597 -0.0063064402 0.0123450363 -0.0105561688 -0.0200431622 -0.0127305537 0.0017833698 0.0007768159 -0.0022700574 -0.0027449242 -0.0083134789 -0.0162266418 0.0043811630 0.0043134538 0.0030586785 -0.0034258399 -0.0113298736 0.0230923639 0.0593028088 -0.0172165825 -0.0069107914 0.0791648705 -0.0307868513 0.0417830786 0.0911519156 -0.0020782280 -0.0016720344 0.0309639694 -0.0331191544 0.0187566486 -0.0209033534 -0.0538811480 0.0151146944 -0.1011062934 -0.0841960199 0.0416616056 -0.0333095798 -0.0430278977 -0.0494884190 0.0132489967 -0.0841352045 -0.0006019364 0.0357244915 -0.0239185269 -0.0066711462 0.0251631276 -0.0604435676 -0.0119360680 0.0342132921 -0.0389291010 -0.0364699130 0.0198982180 0.0127146699 -0.0037990223 0.0500923966 0.0062029303 0.0120738845 -0.0615009707 -0.0382729264 -0.0753479935 0.0003715942 0.0093342509 0.0224411110 -0.0695219136 -0.0300180040 0.0832258789 -0.1115137531 -0.0696269965 0.0549380702 -0.0892731069 -0.0499545715 0.0153979744 -0.0392709265 -0.0316874220 0.0071630899 0.0474011097 0.0040818996 0.0630168231 0.0297016626 0.0090950503 0.0862610572 0.0572006496 0.0562181892 0.0832582157 0.0309224123 0.0062848816 -0.0735733562 0.0305158401 -0.0376444857 -0.0001521176 -0.0214054194 -0.0194941436 0.0056489109 -0.0183068500 -0.0188397676 0.0023365628 0.0147740921 -0.0290120386 0.0005246971 -0.0167380957 -0.0305515222 0.0180758231 -0.0117868050 0.0060809247 0.0209330781 0.0026295581 -0.0102495638 0.0170100158 -0.0050199325 -0.0253393438 -0.0035589405 -0.0187204649 -0.0402602293 0.0187720081 -0.0136186817 0.0319047219 0.0229151455 0.0050762964 -0.0055211608 -0.0477258880 0.0131987410 -0.0392722941 -0.0316479502 -0.0096041545 -0.0056710351 -0.0239185891 -0.0170914391 0.0019442551 -0.0319041045 -0.0175100936 0.0429429640 -0.0155043918 0.0331189739 -0.0317845464 -0.0255753770 0.0132318341 0.0693235318 -0.0127561477 -0.0281689605 0.0500135119 -0.0035954743 -0.0051528018 -0.0024069103 -0.0136371940 0.0371939365 0.0299701470 -0.0396638284 0.0244691423 0.1025442890 0.0000826892 -0.0491201198 0.0758831402 0.0136599995 -0.0182826152 -0.0262005173 -0.0119271372 0.0587813926 0.0352360687 -0.0176785966 0.0517258016 -0.0886808864 0.0615036049 -0.0220918916 -0.0392693660 0.0623758475 -0.0380913494 -0.0287024722 0.0774988828 -0.1247462787 -0.0076963043 -0.0213477836 -0.0073913658 0.0080573997 -0.0129529278 -0.0004060980 0.0001790575 0.0002286898 -0.0120110207 -0.0170280461 0.0131791334 -0.0105670880 -0.0305273325 0.0569892711 0.0432273857 0.0462992892 0.0196458125 0.0424981053 -0.0042757530 0.0177954127 -0.0281492694 -0.0167016451 -0.0115174332 -0.0023987646 0.0023668762 -0.0466673630 -0.0077203011 0.0061368454 0.2468808110 0.1089917807 0.0369381033 -0.0386424233 0.1096607085 0.2545519764 -0.0376902901 -0.0409476137 -0.0606329162 0.0483093548 0.0673457664 0.0527303248 0.0293692222 0.0155788756 0.0161120443 -0.0002792449 0.1014105643 -0.0482114422 0.0354999810 -0.0059330858 0.0058134357 0.0300635466 -0.0537518397 -0.0061011287 0.0124510667 -0.0478782986 -0.0264274420 -0.0775666378 0.0007190556 0.0092285418 -0.0461098819 -0.0426343441 0.0111199179 -0.0433947305 0.0127769513 0.0028402229 0.0075190414 0.0206784618 -0.0216527859 0.0111566013 -0.0063858560 -0.0096274001 0.0021808056 -0.0385095128 0.0204083742 0.0152255314 -0.0428867449 0.0271423521 0.0087065680 -0.0290602313 0.0252094853 0.0161200991 -0.0006783139 -0.0000299458 0.0237283279 -0.0016694933 -0.0097819948 -0.0086336096 -0.0455409240 0.0362336248 0.0311477631 -0.0154609462 0.0025172082 -0.0021796455 -0.0371166203 0.0285180561 0.0277332043 -0.0033475696 -0.0107838847 0.0909002566 -0.0407878028 0.0442338680 -0.0111390379 0.0816329947 0.1035053715 -0.0820330766 0.1092294912 0.0982932595 -0.0996573614 0.0317703022 0.0649361323 -0.0081935964 -0.1025211403 0.0012447439 0.1812889079 -0.0434162563 0.0388309223 0.0090106077 0.1354393565 0.1465670034 -0.0039183551 0.0351902133 0.0119108738 -0.1836870188 0.0378013050 0.0748151657 -0.0224959560 -0.1749706324 -0.0362731363 0.0320423066 0.0042729689 -0.0108612521 0.0415298488 0.0016604289 -0.0145199066 0.1881030047 0.0603982054 0.0023027033 -0.0926971714 -0.0940974296 -0.0988658646 -0.0301439279 0.0228515529 -0.0098854522 -0.0433331675 0.0214939207 -0.0020718038 -0.0315991428 0.0271195754 0.0058636820 -0.0378069886 0.0215837373 0.0084027782 -0.0297502771 0.0310283407 0.0160328510 -0.0315184044 0.0178504194 0.0228656289 -0.0529346086 0.0173548332 -0.0107983838 -0.0527681551 0.0157981409 -0.0107846251 -0.0605936087 0.0168141303 -0.0119364563 -0.0567962277 0.0092164626 -0.0176695586 -0.1332852041 0.0152620791 0.0344465333 -0.1040494273 0.0097563235 0.0367127578 -0.0911399097 -0.0011933170 -0.0136800972 0.0425201511 -0.0550132899 -0.0978383100 -0.1015031852 -0.0039490327 -0.0216963781 0.1534185666 -0.1043088085 -0.1757509669 -0.1085482888 0.0242231807 0.0375215073 0.0096348511 -0.0286230879 -0.0586079966 -0.1360861190 0.0460913159 0.0683381241 0.0797246964 -0.0458556119 -0.0997761902 -0.0287105525 0.0000323095 0.0118868465 -0.0731165891 0.0326798092 -0.0112213588 -0.0157366209 0.0098417466 0.0668422339 -0.0029801159 -0.0367545236 -0.0194686599 -0.0080811848 -0.0084507202 0.0433758453 -0.0069216657 0.0442873850 0.0640589603 -0.0103066344 -0.0201629549 0.0214808875 0.0099193206 -0.0372825913 0.0773306504 0.0169606787 0.0053014246 -0.0451184382 0.0368649049 0.0018230654 -0.0151057236 0.0270864853 0.0014743204 -0.0169855705 0.0082800427 0.0007681233 -0.0031822805 0.0109356784 0.0016161820 -0.0332029404 -0.0187043918 -0.0119877723 0.0150703822 -0.0268679521 0.0031745999 0.0170184666 0.0218854038 -0.0273233498 0.0095124805 0.0282445204 -0.0409316444 0.0020399635 0.0488634295 -0.0425886035 -0.0046387229 -0.0350861267 -0.0197850568 0.0166432188 0.0078336730 0.0060732661 -0.0164127964 -0.0227003618 0.0023853807 0.0101329443 -0.0188611950 -0.0444608475 -0.0165159540 -0.0661820241 0.0535232643 0.0347126643 0.0896919870 -0.0388737896 0.0531293161 0.0060130737 0.0105048645 0.0303965615 -0.0030076696 0.0101864518 0.0230654284 -0.0113100567 -0.0118275531 0.0117731882 -0.0081654924 0.0145279394 0.0156779235 -0.0066989412 0.0000837169 0.0130010698 -0.0184278467 -0.0067986839 0.0126036625 -0.0218953093 0.0048652132 0.0108804466 -0.0071137292 0.0169228885 0.0193538984 0.0030364194 -0.0040596910 0.0070188854 -0.0133695916 -0.0117032302 0.0193289912 0.0446551940 -0.0119601212 0.0334846158 0.0233516493 0.0159343674 -0.0083183735 0.0053938045 0.0328467729 -0.0252739093 0.0531392200 0.0151713993 -0.0090291183 -0.0030502822 -0.0336777439 -0.0054350377 0.0518796548 -0.0243112802 -0.0244132338 0.0372110080 0.0248836538 -0.0023008702 0.0038452178 0.0050664636 0.0082742226 0.0181386477 -0.0468177751 -0.0233090274 0.0784557356 -0.0410897741 -0.0422295719 0.0319314871 0.0427526630 -0.0118303567 -0.0224943888 0.0222607842 0.0215883302 0.0126449837 -0.0719362579 -0.0379956016 -0.0284863562 -0.0468775663 -0.0038027960 -0.0550108970 0.0155766928 0.0390473132 -0.0541826059 0.0401651882 0.0480282190 0.0367623552 -0.0598875808 0.0065001712 -0.0123237640 -0.0152052878 -0.0086437320 -0.0103222292 -0.0105807524 -0.0189157640 -0.0227955188 0.0122926270 -0.0387411199 -0.0403373974 0.0376759134 0.0843047882 0.0033391863 0.0113522762 -0.1505162580 0.0210356716 -0.1536223954 0.0086779341 0.0358942651 0.0730834944 0.0595460923 -0.0091113298 0.0023094200 -0.0178362278 0.0481791733 0.0030414065 -0.0134066418 -0.0486833119 0.2003001703 -0.2947540511 0.0206998125 -0.0197643403 -0.1612544982 0.1089486084 -0.1827081500 -0.2459623905 -0.0363931679 -0.2165266190 -0.2359290331 0.0074496834 -0.1022167283 0.0141169570 0.1318263243 -0.3519308392 0.1441121044 0.0612689899 0.1007215307 0.0745353926 0.0643700815 0.0290450448 -0.0366479299 0.0903879869 0.1289500683 0.0961453772 0.0755911273 -0.0013094598 -0.0120265066 0.0555719588 0.0444160414 0.0003737298 0.0584882717 -0.0297445425 -0.0219512975 0.0199189600 0.0264808300 -0.0383407304 -0.0058078871 0.0285544981 -0.0135664557 -0.0130132520 0.0107482754 0.0313136486 -0.0110460609 -0.0029721137 0.0445494408 0.0115861267 0.0046275566 0.0200490032 0.0260864460 0.0264496963 -0.0311858079 -0.0228405403 0.0365526264 -0.0276380489 -0.0232835379 0.0091146930 0.0438920116 -0.0192165324 0.0002907283 0.0076123546 0.0309709881 0.0026534676 0.0306116650 0.0432305214 0.0392335072 -0.0529030897 0.0290885275 -0.0336593479 0.0077593017 -0.0097245008 0.0294182916 0.0051221962 -0.0339196891 0.0530719608 -0.0001207949 -0.0278518257 0.0258590831 -0.0003215734 0.0106712754 -0.0405526105 0.0023775796 0.0497438433 -0.0485271914 0.0115797072 -0.0095648273 0.0478287632 0.0112656807 -0.0121126931 0.0101901619 -0.0008976212 -0.0458421551 0.0392165422 -0.0025296562 0.0145039322 -0.0670249955 -0.0014908761 -0.0593530658 0.0138901326 -0.0146293032 0.0146052532 -0.0063131113 -0.0225803030 0.0325632460 -0.0054804594 0.0089861381 -0.0246518509 -0.0360058909 -0.0128133277 0.0287921122 0.0067059348 0.0118213038 0.0246824194 0.0032703120 0.0104259475 0.0269266171 0.0210071806 0.0175302985 0.0291726730 0.0189943411 -0.0230103541 0.0171532076 0.0288360042 0.0358535074 0.0239262949 0.0207407960 -0.0365394867 0.0360910164 0.0146929548 -0.0045885603 0.0291769173 0.0129392777 -0.0392327834 0.0476890628 0.0155417707 0.0015271423 0.0264752109 0.0058804837 -0.0668836742 -0.0385497588 0.0074200728 0.0298063622 -0.0237740122 0.0047903356 0.0345934705 -0.0226099089 -0.0005408378 0.0203723891 0.0237863227 -0.0175664907 -0.0062937047 -0.0266096762 0.0008753430 0.0213858706 0.0573303292 -0.0306522702 -0.0326470879 -0.0182440031 0.0076977595 0.0336899934 0.0206940193 -0.0107903783 0.0052627474 -0.0234673139 0.0121146340 0.0401962348 0.0471548461 -0.0186430324 -0.0105064842 -0.0063472179 -0.0220296325 0.0081261062 0.0251146100 -0.0632898786 0.0386550026 -0.0165758709 -0.0279906643 -0.0405325196 -0.0251142516 0.0238921755 0.0448419859 -0.0325281674 0.0254068275 -0.1076816393 0.0592812321 0.0537712053 -0.1622136712 -0.1038170402 0.0509163992 -0.1500412291 -0.0522425177 0.0180666993 -0.0918345862 0.0059830696 -0.0207163425 -0.0455889601 0.0151173924 -0.0237593657 -0.0332666108 0.0131279994 -0.0203423364 -0.0243151374 0.0151864465 -0.0007099799 0.0102667350 0.0084183920 -0.0156564561 -0.0207956812 0.0041471549 -0.0027680044 -0.0027350036 -0.0048479067 0.0041223108 0.0197408442 0.0248134791 -0.0048662857 0.0034461188 0.0320487522 -0.0225599984 -0.0088473035 0.0394625943 -0.0149205029 -0.0066612476 0.0073352279 -0.0006835447 -0.0130496448 0.0082939629 -0.0187208682 -0.0101979334 -0.0115323547 -0.0036510138 -0.0254184481 -0.0042914108 -0.0597642316 -0.0533573643 -0.0466687382 0.0747999160 0.0051304176 0.0312727643 -0.0303886310 0.0295239957 0.0275593672 0.0066723118 0.0259713196 0.0109235298 0.0035317870 0.0158794786 -0.0013277766 -0.0242997398 0.0357143955 0.0205606736 -0.0027179971 0.0560613560 -0.0321118466 0.0138298004 -0.0610397214 -0.0287864887 -0.0083402321 -0.0246768418 -0.0226326345 -0.0022636742 0.0112204705 0.0360861499 0.0014163104 0.0879705907 -0.0552458511 0.0275044226 -0.1258466580 -0.0490264450 -0.0095989313 -0.0603012086 0.0316802969 -0.0277160299 0.0522469556 0.0246129120 -0.0071922933 0.0433322832 0.0231169333 -0.0060839325 0.0440037463 -0.0149640436 0.0160812710 -0.0469938363 0.0201970437 -0.0010832527 0.0710534705 -0.0306934794 0.0203285218 -0.0839306119 -0.0326759266 0.0256428606 -0.0695448735 -0.0078361531 0.0127211115 0.0050746826 -0.0117512097 0.0087618431 -0.0218166921 -0.0454572542 0.0248570410 -0.1224944237 -0.0497563587 0.0388659609 -0.1066451074 -0.0044854399 0.0136991843 0.0254852152 -0.0119203056 0.0027092935 -0.0223369653 0.0561671632 -0.0161023153 0.1661569192 -0.0919612137 0.0346047231 -0.0605898691 -0.0970253379 0.0722023456 -0.0230600635 0.0328493805 -0.0418333944 0.0007293887 0.0457063071 0.0135300236 0.0089824879 0.0190309420 0.0093862101 0.0178563410 0.0054275387 0.0201349926 0.0232282818 0.0124377727 -0.0184042059 -0.0272740722 -0.0718048584 -0.0632554350 0.0525518594 -0.0357658541 0.0832974625 0.0122090990 -0.0390006350 -0.0166963469 -0.0325951465 0.0235959919 -0.0032431027 0.0247419188 0.0304329929 0.0092140933 0.0101224164 -0.2604993777 -0.2931872702 0.1781105572 0.0309333811 -0.1067880427 -0.2083601782 -0.0193019293 0.1921643066 0.2675310496 -0.1159577245 0.0367206784 0.1055677008 -0.0623785539 0.1888409885 0.0384766285 0.0128290673 0.1455397601 -0.0526972051 -0.0762023367 -0.0618759766 -0.0737764288 -0.0713599617 0.0424618534 0.0070200055 -0.0634446805 -0.0181136389 -0.0387838235 0.0795637453 -0.0051166900 0.0042498988 0.0161194394 0.0423928436 -0.0284622197 0.0019901587 -0.0039443404 0.0361909239 0.0065077289 -0.0026694173 -0.0310335204 -0.0245474588 0.0136710926 -0.0059928932 -0.0192618843 0.0221673546 0.0382336250 -0.0042784601 0.0155106909 0.0484589272 0.0230942352 0.0071129579 0.0275170782 0.0261269441 0.0003921878 -0.0214857472 -0.0545938406 0.0179505249 -0.0201036598 -0.0355754197 0.0342048671 0.0511521313 -0.0172175595 0.0033229063 0.0065115003 0.0549308496 0.0067375722 0.0416731129 0.0483912115 -0.0025283956 -0.0418541950 0.0254158656 -0.0216125366 0.0027394690 -0.0105099788 0.0274988883 0.0088018149 -0.0389577777 0.0385978569 0.0067262458 -0.0300872112 0.0094359493 0.0091995450 0.0039184585 -0.0409710588 0.0025885317 0.0447120363 -0.0350565508 0.0065395282 -0.0038452366 0.0434827454 0.0223873087 -0.0216809657 0.0014087116 -0.0037571923 -0.0428574628 0.0112895920 0.0102812623 0.0043492788 -0.0728515083 -0.0068793935 -0.0769900174 0.0107822540 -0.0170924688 0.0280405252 -0.0205292926 -0.0270176242 0.0259843189 -0.0086740899 0.0031163176 -0.0393392010 -0.0413909132 -0.0233627635 0.0226883817 -0.0011486876 0.0175540672 0.0269748834 -0.0001597172 0.0222107933 0.0218803114 0.0154870207 0.0303457680 0.0232317953 0.0108924524 -0.0153318636 0.0143824134 0.0251713187 0.0534371387 0.0174321537 0.0149913225 -0.0275769217 0.0352644016 0.0046973714 -0.0002914115 0.0257148325 -0.0004761856 -0.0438023350 0.0444733877 0.0042048161 0.0015865231 0.0221515276 -0.0101589101 -0.0851043982 -0.0157348001 0.0164751706 0.0342292114 -0.0075529993 0.0143968032 0.0338108210 -0.0045618006 0.0109434860 0.0342466386 0.0315317442 -0.0057037131 0.0137425751 -0.0065581891 0.0136999752 0.0382927835 0.0568718838 -0.0171509569 -0.0034301763 -0.0022833342 0.0132584887 0.0341146766 0.0299175965 -0.0044707402 0.0164452804 -0.0055999075 0.0147099794 0.0358802532 0.0512559602 -0.0165294253 0.0025261582 0.0469314114 0.0049097964 -0.0710003666 0.1302019098 0.0060804606 -0.0765931610 0.0291343690 -0.0069495742 -0.1524056978 -0.0201347789 0.0058140488 -0.0582081188 0.0651562308 -0.0286609235 0.1126420108 -0.0459101593 -0.0814200944 0.1685449131 0.1455650282 -0.0580396174 0.1643905603 0.0773632913 -0.0088045424 0.0816485526 -0.0050162021 -0.0333153627 -0.0462815827 -0.0018005601 -0.0314446408 -0.0320259782 0.0003379876 -0.0257618812 -0.0168735720 0.0104209144 -0.0018195617 0.0153074117 0.0018045830 -0.0221274861 -0.0143460122 -0.0007081170 0.0058218757 -0.0041665823 0.0055638914 -0.0012340193 0.0055803229 0.0067033252 0.0064660768 0.0000938181 0.0017821672 0.0058008634 -0.0001490950 0.0050497213 0.0056793342 -0.0015383649 0.0016963750 0.0048534727 -0.0109045873 0.0033195641 -0.0241277531 -0.0011554904 -0.0123161003 -0.0031005834 -0.0201833259 -0.0195548121 -0.0291554047 -0.0462177904 -0.0153569893 0.0515158377 -0.0043379593 0.0270130547 -0.0061264744 -0.0333597207 -0.0062995885 0.0146487609 0.0313793112 -0.0146399500 0.0159486296 0.0223807901 -0.0311335007 0.0018857452 -0.0214450680 -0.0306346906 0.0280115445 -0.0138104094 0.0052268827 -0.0079572807 0.0507257680 -0.0216714324 -0.0025452088 0.0192353041 -0.0261544091 0.0122908810 0.0039243501 -0.0354546903 0.0278768274 -0.0227386945 0.0381538762 -0.0244552306 0.0834399049 -0.0084121594 -0.0049017729 0.0413445371 0.0052098609 0.0088434202 -0.0297665368 0.0225259639 0.0213811169 -0.0263417227 -0.0059326066 0.0451462650 -0.0268823341 0.0805303554 0.0251325397 -0.0183064169 -0.0034019345 -0.0490718730 -0.0132296378 0.0864207309 -0.0364825056 -0.0266014583 0.0596641294 0.0390829224 -0.0052978002 0.0056545287 0.0099425472 0.0049640503 0.0358911088 -0.0715716745 -0.0237210731 0.1325241880 -0.0646018874 -0.0447599184 0.0574438882 0.0716251058 -0.0063000206 -0.0350183211 0.0359133414 0.0212193431 0.0327039214 -0.1115350142 -0.0335019677 -0.0441438167 -0.0685988231 -0.0154400467 -0.0268665564 0.0069676077 0.0912518624 -0.0282802375 0.0215371888 0.0567288344 0.0011978204 0.0009155975 0.0007038758 -0.0495449065 0.0042984632 -0.0179319636 -0.0118064875 -0.0023917087 -0.0141134914 0.0181234587 -0.0403964457 -0.0095970564 0.0205787973 -0.0274590188 -0.0472790489 0.0744616112 0.0661679081 0.1565254116 -0.0442062737 0.0711701996 -0.0143151611 0.0156161793 -0.0543170371 -0.0286219383 -0.0112309595 -0.0036932943 -0.0127690241 -0.0674415490 -0.0204235296 0.0011547448 0.3184088518 0.0554774987 0.2091367965 -0.0500040876 0.1627734282 0.4119374595 -0.0829066103 0.0449485084 0.0674805571 -0.0013687990 0.1154904098 0.1472575823 -0.0362422959 0.0274403214 -0.0537924024 -0.1473130697 0.1891878627 -0.0846321363 0.0371573377 -0.0263888488 0.0031352937 0.0287182322 -0.0847581463 0.0068336191 -0.0027882113 -0.0955396858 -0.0505199165 -0.1135056034 -0.0021552662 0.0125985566 -0.0689169385 -0.0765350015 0.0037575512 -0.0671859043 0.0069134014 0.0007070827 -0.0025642156 -0.0177333782 -0.0353183459 -0.0386975212 0.0047603179 -0.0067731432 -0.0228743552 0.0336968591 0.0414067385 0.0054114577 0.0295254641 0.0530155001 0.0379332047 0.0127679278 0.0308893194 0.0337191497 -0.0097979512 -0.0259555544 -0.0805537449 0.0049196884 -0.0204323441 -0.0471631490 0.0559917349 0.0588247586 -0.0106866121 0.0041415665 0.0076485644 0.0808623303 0.0145045211 0.0474969672 0.0652583686 -0.0223390048 -0.0516681589 0.0002176515 -0.0041650979 -0.0014603126 -0.0013362680 -0.0023640843 -0.0028927584 -0.0029895906 -0.0033481891 -0.0026214132 -0.0010887860 -0.0015794374 -0.0006056783 -0.0018354678 0.0008792586 0.0001458816 -0.0012087291 -0.0077372238 0.0000216799 -0.0022619541 0.0009800502 -0.0028624501 -0.0053685626 -0.0026387169 -0.0022793401 0.0014297056 -0.0009575946 -0.0012021074 -0.0034784012 0.0023604962 -0.0013026345 -0.0871647942 0.0065476936 -0.0177870511 0.0462577734 -0.0349674477 -0.0302867912 -0.0088137947 -0.0018134764 -0.0031424149 -0.0050793996 -0.0011108048 -0.0020622027 0.0124233044 0.0009795491 0.0364659349 0.0196579891 0.0047782683 0.0426687245 0.0098631304 0.0087124122 0.0358753739 0.0063299035 -0.0046285619 -0.0211479536 0.0046595079 0.0140686113 0.0486119668 -0.0022434633 -0.0104302883 -0.0543141356 0.0240989074 0.0056538636 0.0265106759 0.0115773129 -0.0094994594 -0.0325884001 0.0325556604 0.0068346020 0.0307298862 0.0062921710 -0.0220940973 -0.0787045580 0.0116630562 -0.0003682892 0.0043364742 0.0112802192 0.0016601204 0.0051555945 0.0116996835 0.0019996693 0.0051286665 0.0096490758 0.0078361509 0.0076123229 0.0105409326 0.0022301062 0.0058579156 0.0065851904 0.0109355685 0.0069953180 0.0105302633 0.0067913284 0.0088577412 0.0077167050 0.0094924739 0.0104703111 0.0103348641 0.0085382472 0.0122515658 0.0033115163 0.0122183243 0.0134856271 -0.0415177735 0.0117983112 0.1111436202 -0.1686711597 0.0088226233 0.1206316307 -0.0166096807 0.0230064937 0.2420048247 0.0754430766 0.0139843649 0.0915380908 -0.0616262600 0.0332815723 -0.0844361537 -0.0037355234 0.0415422915 -0.1191298770 -0.0962203986 0.0621915681 -0.0886373631 -0.0631980253 0.0370237746 -0.0881207013 -0.0178248376 -0.0498337848 -0.1122767179 -0.0150815409 -0.0389294334 -0.0765143724 -0.0091737310 -0.0222436508 -0.0325739191 -0.0027460117 0.0117554869 0.0288724374 -0.0077043720 -0.0182806119 -0.0263645709 -0.0064084907 -0.0045985984 -0.0130543703 0.0007084112 -0.0112781355 -0.0253637732 -0.0263368868 -0.0047914389 -0.0101047682 -0.0322648343 0.0193152314 0.0021191123 -0.0505939908 0.0082584959 0.0011666734 -0.0228460981 -0.0152480086 0.0025544460 0.0038699326 -0.0195658064 0.0258626437 -0.0058805232 -0.0103401128 0.0403867613 -0.0113432694 -0.0125163333 0.0314700704 0.0417221741 -0.0050534858 0.0345318236 -0.0684200883 0.0477587099 -0.0151048191 -0.0364897875 -0.0265994088 -0.0753769082 -0.0012617762 -0.0246338884 -0.0475628772 0.0467652122 0.0218775903 -0.0071105668 0.0229274732 -0.0394287894 -0.0330310149 0.0152966607 0.0000917723 -0.0069158603 0.0542190392 0.0163836768 0.0018278580 0.0656102265 -0.0174997247 -0.0090522370 0.0136536074 -0.0492125223 -0.0563850089 -0.0100503253 0.0106234920 0.0116771604 0.0554653027 0.0265026166 0.0081354725 -0.0353967132 0.0240513120 -0.0271837301 -0.0422705017 -0.0150275938 -0.0134085441 -0.0039754281 -0.0473202444 -0.0094572530 -0.0803114817 -0.0430839070 0.0621903282 -0.0098625023 0.0600564341 -0.0412037131 -0.0755266211 0.0268033396 0.0997857181 -0.0378992239 -0.0691470664 0.0764329777 0.0066483805 -0.0235192386 0.0018635237 -0.0315487845 0.0788645831 0.0431732259 -0.1203776392 0.0571566997 0.1476979222 -0.0223183732 -0.1191146003 0.1070019581 0.0511408309 -0.0546788900 -0.0353558956 -0.0305658869 0.1324079869 0.0482394324 0.0065976442 0.0964965819 -0.1228615495 0.1239699343 -0.0452452853 -0.0466342285 0.1332145859 -0.0745427767 -0.0394495241 -0.0400450444 0.0475644196 0.0001963428 0.0190561525 0.0007377704 0.0097890413 0.0085846539 0.0073977476 0.0002953756 -0.0032750929 0.0258187912 -0.0081985870 0.0031189355 0.0039327417 0.0171535170 -0.0087516748 -0.0246812514 -0.0522185545 -0.0010195644 -0.0228950926 0.0050731749 -0.0078879757 0.0179290203 0.0062895815 0.0049609302 0.0053822510 -0.0023274292 0.0008167473 0.0029952802 0.0013897623 -0.0617572324 0.0054114502 -0.0825823872 0.0175950096 -0.0557453971 -0.0923410361 0.0232997719 -0.0468887138 -0.0539027121 -0.1307355489 -0.1201187064 -0.0776065712 -0.0392728740 0.1333698709 0.0550587610 0.1483167548 -0.1004531328 0.0288426036 -0.0238402776 -0.0021263252 -0.0139422664 -0.0186066589 0.0402055096 -0.0008449750 -0.0045150236 0.0348292152 0.0144221610 -0.0016829694 0.0072152181 0.0062713238 0.0007509465 -0.0023079145 0.0018673665 0.0003054936 0.0024132024 0.0020160601 -0.0056414949 -0.0238945068 -0.1053835780 -0.0839491712 0.0184982067 -0.0389558315 -0.0479180224 0.0797606433 0.0848060877 0.0241456143 0.0553635753 0.1280161650 0.0918158165 0.0141800172 0.0837378736 0.0860302415 -0.0192621241 -0.0696646587 -0.1740491331 0.0239485536 -0.0750600628 -0.1095731468 0.1372401309 0.1288738438 -0.0046379723 0.0059275404 0.0196736724 0.1824938898 0.0039998537 0.1325343713 0.1668086099 -0.0574112132 -0.1334432037 -0.0322792996 0.0324126460 -0.0000132552 0.0073723543 -0.0229756868 -0.0045150055 0.0405831559 -0.0376229247 -0.0017362315 0.0295871172 -0.0086201098 -0.0054532603 -0.0075561078 0.0446927342 0.0000041864 -0.0510137325 0.0485772747 -0.0046925422 0.0016525917 -0.0441935482 -0.0186234949 0.0273144123 -0.0013784492 0.0049864973 0.0421005325 -0.0141002034 -0.0051328928 -0.0058553993 0.0755093204 0.0117840280 -0.1779720920 0.0150422361 -0.0409270826 0.1301962299 -0.0762401206 -0.0742712840 -0.0151099686 0.0092031752 -0.0017817250 0.0433782350 0.0403097574 0.0223653991 0.0106758799 0.0344800804 0.1036707601 0.0121855330 0.0434913288 0.1163641580 0.0076768056 0.0202377911 0.0760210382 -0.0174582620 -0.0367345260 -0.0608064505 0.0116758872 0.0215259275 0.0796744180 -0.0348606678 -0.0814211331 -0.1701837250 0.0064462963 0.0328070382 0.1030931825 -0.0184300443 -0.0295095416 -0.0435876630 0.0119407533 0.0401171139 0.1195847699 -0.0392742329 -0.0700588227 -0.1385759506 0.0164133633 -0.0364465506 -0.0500802626 0.0092102261 -0.0271735126 -0.0416020411 0.0040583077 -0.0208853396 -0.0675021842 -0.0250408233 0.0153649604 -0.0502004591 -0.0052687913 -0.0260495824 -0.0759707688 -0.0480685052 0.0332385008 -0.0471679056 -0.0056132927 0.0014249604 -0.0307762488 -0.0368871475 0.0293081574 -0.0298522193 -0.0095116546 0.0141163490 -0.0083673809 -0.0675731844 0.0600427263 -0.0067878647 0.0030089096 0.0137306562 -0.0375844500 0.0105168335 0.0416215881 -0.0597541828 0.0081735205 0.0257978115 -0.0438895352 -0.0283762295 -0.0190208544 -0.0556645763 0.0189176560 -0.0086908307 0.0203932012 0.0139408117 -0.0013049381 0.0263101854 0.0204690705 -0.0188767775 0.0102398414 0.0168286640 -0.0162748870 0.0310236839 -0.0006447989 -0.0027636423 -0.0120705934 -0.0005076552 -0.0008529754 -0.0081469987 0.0004480261 0.0000488205 -0.0056252819 0.0007176367 0.0038769806 0.0014060837 0.0006649177 -0.0006488542 -0.0063323750 -0.0026000488 0.0040205766 0.0003356076 -0.0019961394 0.0043666970 0.0000628319 0.0027390192 0.0006683940 -0.0050337080 0.0004835450 0.0018404779 -0.0029236560 0.0058685703 -0.0010495775 -0.0066867958 -0.0061947044 0.0013570705 0.0025397073 0.0025348219 -0.0029978477 0.0021363081 -0.0084771597 -0.0037313799 0.0037453658 -0.0074330647 -0.0043741041 0.0023105035 0.0030656061 0.0047466424 0.0049095744 -0.0300279255 0.0197462804 -0.0250068750 -0.0189742403 0.0001107230 -0.0164108991 -0.0075111917 0.0001507681 -0.0065856983 0.0164788484 0.0043334015 0.0092384921 0.0090631637 -0.0078418483 0.0065127595 -0.0095473045 0.0094257834 -0.0073708030 0.0075896404 0.0096248324 0.0056077033 0.0166779593 -0.0015059785 0.0056110537 0.0096507207 -0.0148294727 0.0043486444 -0.0229112420 0.0158716727 -0.0159468142 0.0065878529 0.0167582896 0.0068989027 0.0006631243 0.0030716908 -0.0005579536 -0.0006832403 -0.0072929073 0.0061387263 -0.0023433547 -0.0057003638 -0.0037424635 -0.0186575064 0.0044215405 -0.0279405339 0.0067189920 0.0040041398 0.0265551462 -0.0194894820 0.0110317912 -0.0280205414 -0.0197772964 0.0066347328 -0.0343801042 -0.0117939148 0.0052468282 -0.0163054413 -0.0013373559 0.0072823459 0.0111711024 -0.0254552303 0.0136333735 -0.0339117833 -0.0158884740 0.0127232471 -0.0279302528 -0.0097951254 0.0039610486 -0.0168353432 0.0082822063 0.0052825856 0.0345470865 0.0261867965 -0.0001767744 0.0666110487 0.0147580121 0.0006715180 -0.0137117908 0.0148956368 0.0014882565 -0.0084468293 0.0003163393 0.0012066992 -0.0021627634 -0.0151300109 -0.0030005711 -0.0188809814 -0.0083086277 -0.0179097669 0.0107596291 0.0079873306 -0.0498002265 0.0638001158 -0.0214602857 0.0384002115 -0.0156048496 -0.0383510821 0.0306465770 -0.0229238991 0.0754700237 -0.0132285013 -0.0278992817 0.0091794636 -0.0066194469 0.0285279437 -0.0064326295 -0.0079400049 0.0050247524 0.0296905036 0.0082790288 -0.0136276466 -0.0363005979 0.0374905154 -0.0270686533 -0.0345560122 0.0056288029 -0.0021293837 -0.0628296589 0.0245763893 -0.0389174499 0.5143769832 0.2981170107 0.0621116786 0.2103686314 -0.5483867446 -0.1733701681 -0.3680188861 0.1218073256 -0.0208213134 0.0338417371 0.0331142751 0.0930627695 0.0280591634 -0.0475172251 0.0485711092 0.0099148722 -0.0673718826 0.0017353629 0.0230428901 -0.0097932343 -0.0384483084 0.0421576138 0.0310380872 0.0136967771 0.0542754854 0.0146776160 -0.0371266391 -0.0013607411 -0.0023707806 -0.0061272747 -0.0116133841 -0.0049535011 0.0055882766 -0.0071679270 0.0025114369 0.0140012214 0.0026551911 0.0088204626 0.0105019540 0.0087487424 0.0036389895 0.0077860266 0.0067236557 -0.0023118771 -0.0028664697 -0.0217652675 -0.0095052311 0.0074215005 -0.0141281476 0.0025848176 0.0219408339 -0.0011907987 0.0016643637 0.0009878839 0.0187663847 0.0064510379 0.0092744431 0.0141093453 -0.0041911172 -0.0093677375 0.0017322967 0.0015221862 -0.0002607128 0.0017417778 -0.0011385438 0.0030912550 -0.0000777951 -0.0023805000 0.0034692015 -0.0017835490 -0.0017824285 0.0018371407 -0.0015632151 -0.0003517150 -0.0013761847 0.0027347422 0.0039900403 -0.0012197559 0.0032537562 -0.0008816794 0.0050762060 -0.0001145461 -0.0008155785 0.0001712432 -0.0040977109 -0.0018718492 0.0021493184 -0.0033330763 -0.0003959629 -0.0033769275 -0.0183012209 0.0007042236 -0.0030506611 0.0107151442 -0.0111103943 -0.0044530878 0.0027325548 0.0010177939 -0.0006395348 -0.0022882185 -0.0009729988 -0.0027886338 0.0030811602 0.0053060229 0.0067156467 0.0023072941 0.0061998473 0.0085529961 0.0047578552 0.0026932021 0.0069522786 0.0015701947 -0.0042086458 -0.0042803889 0.0076289081 0.0031886654 0.0084014811 0.0009786234 -0.0088448125 -0.0120597180 0.0004894863 0.0033545528 0.0075831207 -0.0006138203 -0.0043080618 -0.0049317550 -0.0013988678 0.0040057578 0.0088726259 -0.0035470312 -0.0095743417 -0.0138405789 -0.0006809956 0.0035709831 -0.0010234723 -0.0005312246 0.0026616810 -0.0031798657 0.0016901144 0.0014082824 -0.0005460745 0.0023430148 -0.0014484410 -0.0015665893 0.0035635671 0.0017996076 0.0010720382 0.0051860508 -0.0037715423 -0.0018168090 -0.0039010147 0.0018837380 -0.0019625404 -0.0024159116 -0.0003113314 -0.0010304329 -0.0071000725 0.0024402836 -0.0021653376 -0.0044630645 -0.0013015393 -0.0001855461 0.0170434085 -0.0368183001 0.0218021362 0.0453935689 -0.0781696804 0.0523386216 -0.0038273195 -0.0717270367 0.0011663041 0.0478283143 0.0125397351 0.0520575582 -0.0078835094 -0.0108183023 0.0082178044 -0.0302750737 -0.0115537579 0.0235492089 0.0076174277 -0.0170367504 0.0178292265 -0.0010786328 -0.0115326913 0.0079080300 0.0085548961 0.0161170104 -0.0025446187 0.0190413082 0.0139912285 0.0143280382 0.0129784378 0.0113273191 0.0067208575 -0.0064249172 -0.0012538482 -0.0091760191 -0.0043426188 0.0083345501 -0.0087896878 -0.0154951349 -0.0075573049 0.0113035182 -0.0100694688 -0.0056278802 -0.0028081565 -0.0028417205 -0.0130455157 0.0126346707 -0.0101343590 -0.0074195938 0.0192747938 -0.0002732191 -0.0131276951 0.0135216710 -0.0123317545 -0.0122536015 0.0097261905 -0.0090081479 0.0106171009 -0.0063691063 -0.0057027636 -0.0029254679 0.0007171929 0.0080509337 -0.0466057040 -0.0122252948 0.0102353852 0.0245523014 0.0075330273 -0.0709409046 0.0418183576 -0.0909768276 -0.0239755097 0.0036989316 -0.0254361313 -0.0116140705 0.0020812668 -0.0124190096 0.0040284200 0.0070163791 -0.0065275614 0.0031223576 -0.0043511214 -0.0017578520 -0.0051928531 0.0044850926 -0.0004450930 0.0049544714 0.0068410695 0.0048388753 0.0136149752 -0.0018517551 0.0045013890 0.0032671640 -0.0106212999 -0.0044828451 -0.0111530759 0.0070848280 -0.0002922878 0.0019837736 0.0146320799 0.0028781872 -0.0281685842 0.0190116630 -0.0459143557 0.0097077007 -0.0055859162 0.0066583238 0.0053947057 -0.0030569936 0.0126143932 0.0015778013 0.0024462526 -0.0086537945 0.0025974462 0.0004683465 0.0044130487 0.0021682540 0.0019681057 -0.0087389420 0.0001395528 0.0038483384 -0.0063739588 -0.0014083059 0.0027282364 -0.0036876409 0.0040247118 -0.0005521176 0.0014822113 0.0018517644 0.0016035704 -0.0113378250 0.0074814564 0.0069265209 0.0114568679 -0.0015081283 0.0032632619 -0.0008199253 0.0059469472 -0.0035729252 0.0062068717 0.0047111606 -0.0015497532 0.0133493570 0.0174275321 -0.0047059199 0.0091874107 0.0169462965 0.0013484392 0.0050048245 -0.0037253157 -0.0105043813 0.0181996502 -0.0020534553 0.0202434160 -0.0340871362 -0.0112066030 0.0250641622 -0.0343848388 -0.0432551970 0.0706253301 -0.1209826419 0.0002355530 -0.0659147767 0.0657846742 0.0895316159 -0.0262895177 -0.0045812285 -0.1203016131 -0.0151614093 0.0733995366 -0.0044222602 0.0428558805 -0.0369276833 0.0256232932 -0.0239326324 0.0365900769 0.0066280013 -0.0030783586 0.0039611675 0.1422703869 0.0634538785 -0.0584144345 0.0457690863 0.0728573895 0.0040685689 0.1912007273 -0.1392610937 -0.0416775810 0.0840634660 0.1503855034 0.3188478511 -0.0765487861 -0.2880221391 -0.2120467064 -0.5459796009 0.1187021128 0.0760216438 0.0260907134 0.0316018775 -0.1946013047 0.0064686753 0.0308581735 -0.1001816308 -0.0401973999 0.2217396511 0.0341263060 0.0730831204 -0.0240436457 -0.0051705275 -0.0193710445 0.0310537624 -0.0632873650 -0.0455336412 -0.0074298549 0.0525117447 0.0162181702 0.0292896364 -0.0144510220 0.0187551436 0.0218403215 -0.0142054974 0.0022678918 -0.0135721016 0.0030254900 -0.0100941861 -0.0271970315 0.0122143271 -0.0076673005 -0.0061446275 -0.0002213257 0.0059205635 0.0261774735 -0.0144279360 0.0302724111 0.0307927330 -0.0201344608 0.0058247841 -0.0258305540 0.0048371699 -0.0044414444 -0.0049471756 0.0037528601 -0.0146264006 -0.0072958221 -0.0019069208 0.0052742655 0.0425903268 -0.0204147085 -0.0120619098 -0.0108963797 0.0066678175 -0.0083211983 0.0019538411 -0.0173454941 0.0034266257 0.0180938509 -0.0223890255 0.0138260196 0.0142830864 -0.0117398577 0.0147135753 -0.0030008570 0.0144967684 -0.0212046498 -0.0224996561 0.0114119810 -0.0157748002 -0.0084527633 -0.0301491027 0.0048385513 0.0069045059 -0.0023188523 0.0247545715 0.0220460438 -0.0158220629 0.0297089531 -0.0034652290 0.0311148399 0.0061097049 0.0119458257 -0.0039811211 -0.0070844872 0.0151123277 -0.0019606617 -0.0099136830 -0.0116451784 0.0081697741 0.0193699781 0.0061113624 0.0189278008 0.0077005267 0.0032140929 -0.0014138720 -0.0005690132 0.0003847507 -0.0063726330 0.0060354059 0.0033559943 -0.0085555763 0.0077383114 0.0066907059 -0.0079910831 0.0015793531 0.0019867360 -0.0123631071 0.0072786478 0.0049274973 -0.0116153399 0.0045294957 0.0077617796 -0.0020415290 0.0060016894 0.0111142901 0.0025348036 0.0095944822 0.0084524158 0.0006202163 0.0065615525 0.0127957706 0.0118508477 -0.0022523156 -0.0149163341 -0.0074397527 0.0033144327 -0.0138818346 -0.0003021490 -0.0027707798 -0.0140011030 -0.0121551918 -0.0107851981 -0.0028365943 -0.0057964915 -0.0030244932 -0.0163540598 -0.0166474890 -0.0179516111 0.0041762007 -0.0071028675 0.0042526796 -0.0083761511 0.0001489550 -0.0075742022 0.0011660720 0.0019088452 0.0075647225 -0.0077350872 0.0026582014 -0.0129498980 0.0112521976 0.0070144140 0.0132708037 0.0113891690 0.0011105824 -0.0089890760 0.0121980709 0.0017161286 0.0131392040 0.0011194581 0.0352336341 0.0541234637 0.0121032030 -0.0059804974 0.0220946684 -0.0323139053 0.0832683698 -0.0568530808 0.0017234309 0.1528460626 0.0814125396 -0.0868004321 0.0787227156 0.0414434383 -0.0673394771 0.1252118330 0.0413296854 0.0664673907 -0.0121207829 0.0777453980 0.0806429519 0.0896034663 0.0608434973 0.0590892339 0.0329142716 -0.0218398080 0.0078397413 -0.0572092337 -0.0233542852 0.0252751721 -0.0622780190 -0.0599371837 -0.0022803012 0.0466826223 -0.0367387372 0.0104352064 -0.0055149485 0.0134809551 -0.0224138000 0.0320154484 -0.0233155650 -0.0171591265 0.0604896005 0.0471349463 -0.0313487754 0.0303843908 -0.0611077953 -0.0312875651 0.0371651905 -0.0423061505 0.0317929521 -0.0408550145 -0.0525553395 -0.0294003595 0.0157409951 -0.0267279735 -0.2350705416 -0.0916990864 -0.0374308777 0.1346244055 0.0628380715 -0.0068819104 0.0249106348 0.0260757807 -0.0622600868 -0.0133233972 -0.0814868877 -0.0158951987 -0.0148558656 -0.0392260537 0.0660505676 0.0076965963 0.0294209858 0.0343100625 -0.0422720491 0.0026223160 -0.0102412407 0.0132863839 -0.0159497050 0.0517172562 0.0153074236 0.0277732784 0.0697337162 -0.0187962990 0.0158111881 0.0279550322 -0.0587121398 -0.0177745631 -0.0531385178 0.0333208105 -0.0305978177 0.0581640979 0.0273046052 0.0436419500 0.0134050675 0.0100584689 0.0184120970 -0.0370220640 -0.0016958806 -0.0347460507 0.0053923569 -0.0363593315 -0.0347879193 -0.0600582936 -0.0378719213 0.0413933372 -0.0067639430 0.0351529935 -0.0453410776 -0.0505671932 0.0077277253 0.0841480064 -0.0222014987 -0.0608050722 0.0589688002 0.0096455263 -0.0266048154 -0.0038445856 -0.0173608710 0.0475966260 0.0372889562 -0.0784610697 0.0281988597 0.1280079997 -0.0103681580 -0.1004327188 0.0822052018 0.0400362023 -0.0480366490 -0.0312442427 -0.0131373890 0.0894611721 0.0493333714 0.0003031614 0.0644562380 -0.1201137439 0.0764416508 -0.0249781615 -0.0474987524 0.0903417937 -0.0083741195 -0.0304706503 0.0082670328 -0.0572582538 0.0641425857 0.0059129424 -0.0116708052 0.0280391805 0.0202872629 -0.0098915397 0.0122493022 0.0425865984 -0.0352036578 0.0548753053 0.0197479382 0.0267374964 -0.0498927279 -0.0344675193 0.0212617104 0.0787557737 0.0222580050 0.0541849774 -0.0415684497 -0.0064872954 -0.0365730711 0.0068070000 -0.0068084816 0.0165767243 -0.0341960009 -0.0368226983 -0.0109402026 -0.0012274586 -0.0232889573 -0.0933345066 0.1594261116 -0.0293012227 -0.0229449494 0.1175917087 -0.1496781775 0.1351299637 0.1102205175 -0.0096259568 0.0327080117 -0.0225971123 0.0127746999 0.1061530414 0.0018900004 0.0671480719 0.0859469681 -0.0809177286 -0.0289793959 -0.0400256737 0.0772915793 -0.0215180204 -0.0170188286 0.0800962472 -0.0150571105 -0.1473983440 -0.0439339878 -0.0967859844 0.0188324601 0.0209185672 -0.0266901896 -0.0677951871 0.0300907292 -0.0155154103 0.0031669044 -0.0208891926 0.0635463193 0.1053519142 -0.0365480559 0.0788819020 0.0617594091 -0.0359088934 0.0093994159 -0.0881459675 0.0150097593 -0.0446663030 -0.1259369355 0.0354022416 -0.0532291181 -0.0574704231 0.0102030033 0.0014933751 0.0723056621 -0.0220001870 0.1380734299 0.0974004620 -0.0540522507 0.0303302360 -0.1496735663 0.0197900481 -0.0171353116 -0.0237889277 0.0134698781 -0.1011060029 -0.0767285684 0.0096884631 -0.0182281879 0.1279886441 -0.0249421617 -0.0189520921 -0.0653109167 0.0270466032 -0.0315334184 0.0151922626 -0.0566575334 -0.0114107595 0.0812317097 -0.0759413970 0.0322710052 0.0527143170 -0.0356627967 0.0527478289 -0.0307241142 0.0515674603 -0.0419533814 -0.1182404092 0.0477473205 -0.0597740935 0.0006325828 -0.0966763283 -0.0006511308 0.0211992393 -0.0098369775 0.0668153274 0.0801758774 -0.0495978598 0.1007866619 -0.0448112929 0.1006332743 0.0497833555 0.0370901140 -0.0067703995 -0.0481647909 0.0701374446 0.0022429959 -0.0293958286 -0.0476215408 0.0286412415 0.0417927366 -0.0070667425 0.0548455469 0.0463740527 0.0261648884 -0.0237258955 0.0031826867 0.0135142446 -0.0470381042 0.0518184222 0.0136591551 -0.0446486464 0.0535035714 0.0174985486 -0.0273591389 0.0501929587 0.0078982379 -0.0595665055 0.0583770923 0.0044445725 -0.0299547925 0.0166635644 0.0326994626 -0.0208688679 0.0329599700 0.0354788195 0.0143752266 0.0223432049 0.0357858198 -0.0106611948 0.0298031001 0.0353201700 0.0642621009 -0.0049134117 -0.0070340832 -0.0114305617 0.0136755601 -0.0112394491 -0.0007702945 0.0096833708 -0.0278680112 -0.0015292920 -0.0173122173 -0.0267161029 0.0165618789 0.0312871982 -0.0285711084 0.0033478280 -0.0271921707 -0.0215648023 0.0224304110 0.0067987147 -0.0251348492 -0.0015559431 -0.0199597662 -0.0202974958 0.0254679083 0.0020369250 -0.0326942037 -0.0178837896 -0.0397814235 -0.0116279630 0.0377962014 -0.0291724145 0.0256384234 0.0091092005 -0.0788043273 0.0601346032 -0.0149437816 -0.0032556455 0.0660228637 0.0461114008 -0.0449024852 -0.0179868356 -0.0196748313 -0.0201806730 0.0392227065 -0.0909420328 0.0648133629 0.0190228927 -0.1582625939 -0.0808808062 0.0881988177 -0.0951755926 -0.0354134988 0.0641809745 -0.1189824643 -0.0024822907 -0.0419272217 0.0244348013 -0.0062858499 -0.0300917246 0.0508246493 0.0091526051 -0.0415760709 0.0247686360 0.0395245103 0.0024849517 -0.0228613910 -0.0000362581 -0.0490491144 -0.0067139569 0.0327947380 0.0619867274 -0.0211557637 0.0424700629 0.0509640063 0.0050197566 0.0268931464 0.0792701250 -0.0543007574 0.0430680437 0.0437043160 -0.0718225098 0.0527648702 0.0667760998 -0.0648630973 -0.0184806286 0.0512805367 0.0051382396 -0.0021207533 -0.0645614894 0.0314223735 -0.0809181048 -0.0336493342 0.0200989877 -0.1456362581 -0.0209423016 -0.0511498471 -0.0608644506 -0.0642619489 0.0050887116 -0.0054072932 0.0254751095 0.0203856352 -0.0650886488 0.0067212458 -0.0939215458 -0.0168317189 -0.0019762342 -0.0402732616 0.0699371956 0.0000698566 0.0509007886 0.0440692063 -0.0369419608 0.0287330930 -0.0204860639 0.0239996901 -0.0346792743 0.0504165169 0.0111301710 0.0365059228 0.0654963592 -0.0173011221 0.0327144110 0.0437367063 -0.0509917879 0.0220099814 -0.0701114626 0.0486353562 -0.0739405374 0.0562978439 0.0180650403 0.0491746922 0.0236836582 0.0066858807 0.0326696195 -0.0297222200 0.0011915287 -0.0301300040 0.0144029328 -0.0350045139 -0.0259329565 -0.0516566415 -0.0353871616 0.0354992718 -0.0017098137 0.0264486322 -0.0458023576 -0.0422689422 0.0024965728 0.0752495327 -0.0145771158 -0.0586740710 0.0527297840 0.0134911910 -0.0284934384 -0.0065316280 -0.0114868681 0.0381037755 0.0331093207 -0.0665568911 0.0204031174 0.1141241166 0.0000562871 -0.0958783357 0.0842683190 0.0430183974 -0.0494191656 -0.0300124634 -0.0070150057 0.0770699330 0.0456350962 0.0040667231 0.0532213709 -0.1148801774 0.0533136703 -0.0143802962 -0.0499896451 0.0646017518 -0.0232004535 -0.0351395490 0.0366930728 0.0279581884 -0.0810286130 0.0219469923 -0.0057514487 0.0238288679 0.0243109060 0.0099794805 -0.0154425004 0.0102000942 0.0390970295 -0.0453983041 0.0231601998 -0.0196612557 0.0251913504 0.0369224712 -0.0190692771 0.0218149168 -0.0782671108 -0.0180990044 0.0050895076 -0.0147806199 0.0128799354 -0.0037146269 0.0113977380 0.0065329592 -0.0258967166 -0.0280599067 -0.0188474508 0.0003463383 0.0441820628 0.0015512482 0.0081406442 0.0284493490 -0.0167484723 0.0449268870 0.0327830341 -0.0450450488 0.0005617304 0.0097642905 0.0551363577 0.1255075611 -0.0641486109 -0.1447969021 -0.1783497947 -0.3074021426 0.0230842425 0.0328997524 -0.0268118942 -0.0155948201 -0.0706684473 -0.0301252926 0.0412036184 0.0155951359 -0.0480068633 0.0518531769 0.0062593063 -0.0467157235 0.0082302368 0.0299570248 -0.0334922085 -0.0585380704 -0.0077300456 -0.0392262045 -0.0177382275 0.0115922649 -0.0136209390 -0.0389205602 0.0453029628 -0.0131080081 -0.0213165356 0.0346904942 0.0060121100 0.0310634076 -0.0208936318 0.0011435640 0.0554063658 -0.0451250547 -0.0020938168 0.0302855821 -0.0274863367 -0.0208362684 -0.0212429167 0.0263788512 -0.0243413293 -0.0369360840 0.0475945551 0.0176246900 0.0361682649 -0.0364941624 -0.0148679575 0.0182617028 -0.0114974131 0.0046114214 0.0432213596 -0.0374963151 -0.0384196481 -0.0290574174 0.0470862436 0.0659270756 0.0368970651 -0.0386751523 0.0347464861 0.0081907444 0.0617752646 -0.0308861389 -0.0494004338 0.0813512663 -0.0619091369 -0.0568303471 0.0434861265 -0.0447449983 -0.0156845024 -0.0628064466 0.1111408935 0.0763480252 -0.0556538295 0.0734486255 0.0525017156 0.1246053508 -0.0343007806 -0.0250050848 0.0058182212 -0.1121969479 -0.0868028682 0.0599259067 -0.1027264470 -0.0352143542 -0.1339335399 -0.0104943274 -0.0137209226 0.0122625845 -0.0324151085 -0.0060776827 0.0161578149 0.0406698919 0.0335979690 -0.0256608710 -0.0958471027 -0.0406799158 -0.0803073568 0.0382932851 -0.0194212889 -0.0122335905 0.0529486957 -0.0190450030 -0.0218081717 0.0482114443 -0.0112637598 0.0031344504 0.0561500693 -0.0054448539 0.0017543494 0.0521009083 -0.0046979510 0.0190847637 0.0542015584 0.0102587202 0.0150998094 0.0630830799 -0.0196317167 -0.0208846243 0.0659572164 -0.0151395339 -0.0160103378 0.0630759615 -0.0190887047 -0.0166375873 0.0693831811 -0.0106010817 -0.0181893945 0.0140931200 0.1085683388 0.0381969826 -0.0173664248 0.0989831626 0.0003936997 0.0268752408 0.0788712587 0.0977715664 0.0522338851 -0.0104593672 0.0723738038 0.0524133482 0.0996795830 0.1436565476 0.0887640480 -0.0572922520 0.0977592834 -0.0264734557 0.0306877623 -0.0102935097 0.0370767324 -0.0429894639 0.0105692724 -0.0532994303 0.0112030444 -0.0577398250 0.0646782492 -0.1200290194 -0.0214053599 -0.0301077339 0.0531052565 -0.0061866340 -0.1005605065 0.1064552041 -0.0436922300 0.0090358710 0.1155649726 0.0437043833 -0.0602737358 -0.0131651784 -0.0488199591 -0.0059834836 0.0357730723 -0.0926933547 0.1033211550 0.0781708663 -0.1527581216 -0.0870830374 0.0598909993 -0.1501814408 -0.0274539547 0.0185026712 -0.0632607167 0.0082104521 0.0028164414 -0.0018302582 0.0136060888 0.0179820866 0.0465988640 0.0199946887 0.0067669174 0.0198491865 0.0062958922 0.0119144366 -0.0319953803 -0.0135961044 -0.0107223681 -0.0227094038 -0.0001439997 0.0262060079 0.0068551092 0.0080411550 0.0319742369 -0.0082703732 0.0126183322 0.0282412163 -0.0223786992 0.0094193614 0.0163342441 -0.0181193473 0.0365060326 0.0222090812 -0.0234430378 -0.0381253225 -0.0016970090 0.0280315069 -0.0128979724 -0.0245092114 0.0204101880 -0.0477706326 -0.0310658812 0.0333993104 -0.0942718152 -0.0684838089 -0.0481354913 -0.0006686402 -0.0133120826 0.0309913155 -0.0652117305 0.0468249598 -0.1097081829 0.0061310685 -0.0221144458 0.0214845239 0.0008038035 -0.0097223673 0.0001773595 -0.0355157045 0.0358600408 -0.0825485985 -0.0281860254 0.0099763909 -0.0675602355 0.0370078431 -0.0192305413 0.0615090394 -0.0064060893 0.0202616623 -0.0246802160 0.0058438762 0.0057226378 -0.0292969418 -0.0363997921 0.0030689913 -0.0869132946 0.0741775412 -0.0403356412 0.1414599001 -0.0102027231 0.0332760915 -0.0252993292 -0.0698211235 0.0492038953 -0.1262119235 0.0202589550 -0.0079188206 0.0015242842 -0.0145362638 0.0210548884 -0.0206232835 0.0182228411 0.0140951577 -0.0104168199 -0.0053887016 0.0046921087 0.0138043087 0.0172946486 0.0073978602 -0.0194403115 0.0013420991 0.0248650147 -0.0103128938 -0.0084620416 0.0181627305 0.0071534406 0.0039122753 -0.0024833605 -0.0099069121 0.0250139474 0.0017535612 -0.0258126288 -0.0020588059 0.0383657020 -0.0180086608 -0.0154617613 0.0235551556 0.0148302776 0.0011241588 -0.0185148455 -0.0168063280 -0.0107689419 -0.0036911180 0.0303534374 0.0832836111 -0.0396925638 0.0979983084 0.0899170860 -0.0710640847 0.0507086126 0.0105307393 0.0099972395 -0.0270145080 -0.0460432613 0.0391008294 -0.0824233377 -0.0385343820 0.0038925096 -0.0056010341 -0.0177124996 -0.0393579668 0.0268040383 -0.0239491019 0.0056805446 -0.0121055977 -0.0131535195 0.0163550913 -0.0170340882 0.0661734097 0.0086714293 0.0106602641 0.0170684492 -0.0063613080 -0.0043448161 0.0007316476 -0.0227483129 0.0502001995 0.0238568105 0.0211032521 -0.0034310424 0.0240091842 0.0377748488 -0.0240279480 -0.0338528340 0.0315293462 0.0268425628 -0.0225283270 -0.0167318819 -0.0463433146 -0.0979668081 -0.1184414785 -0.1302539643 0.0281601937 0.2326637006 0.2225328058 0.3678966062 -0.0573463694 -0.0170425454 0.0359013554 0.0220487084 0.0374278397 0.0366743346 -0.0397119672 -0.0473295335 0.0525209461 -0.0078648647 0.0026760779 0.0551576991 -0.0234300492 -0.0516961106 0.0210972052 0.0690275128 -0.0168455283 0.0201354876 0.0374315448 -0.0014744509 0.0143116007 0.0187850310 -0.0037841684 0.0174657233 0.0159629801 -0.0065768820 0.0061344817 -0.0054474536 -0.0047047344 -0.0099241694 -0.0159726835 0.0009318330 -0.0127687084 -0.0105684171 0.0017954507 -0.0020931959 0.0121067695 -0.0006360821 0.0271355904 0.0223007375 -0.0106871980 0.0146107042 -0.0158217729 -0.0093469602 -0.0088702744 -0.0024768833 0.0016184148 -0.0234437671 -0.0188382848 0.0057968164 -0.0100508664 0.0204135150 0.0040313116 0.0191292951 0.0132257705 -0.0151855509 0.0111629933 0.0022709631 0.0157687456 -0.0092448551 -0.0144093093 0.0217386272 -0.0188391881 -0.0159698327 0.0100620380 -0.0130650360 -0.0045816423 -0.0214504747 0.0319862048 0.0259202109 -0.0205594040 0.0255232088 0.0114661337 0.0365306515 -0.0112651420 -0.0052347504 0.0002768198 -0.0346924896 -0.0227616234 0.0144008220 -0.0308743369 -0.0106213674 -0.0432256808 0.0041280414 0.0055693041 0.0001325970 -0.0172355347 0.0121250244 0.0031398552 0.0082824921 0.0146558270 -0.0104555051 -0.0294790952 -0.0082631974 -0.0250569387 0.0318835906 0.0128790501 -0.0059708337 0.0195305616 0.0094730469 -0.0184957714 0.0422419065 0.0020209102 -0.0093561424 0.0392589376 -0.0071690474 -0.0124517613 0.0521141541 0.0013513882 -0.0106773334 0.0411618354 -0.0155779011 -0.0182493012 0.0221191048 0.0083872167 -0.0041498452 0.0304103940 -0.0022356780 0.0009573940 0.0167505513 0.0109625765 0.0027991802 0.0258968086 -0.0079799967 0.0134086888 0.0035282704 0.0515169691 0.0017854143 -0.0086566509 0.0446747662 -0.0156490460 0.0138407545 0.0297506296 0.0327387102 0.0135394831 -0.0152639502 0.0267173243 0.0347343856 0.0394195223 0.0574179289 0.0290064132 -0.0386388236 0.0432672377 -0.0219217363 0.0073739484 -0.0204215939 -0.0013484139 -0.0273969778 -0.0002265118 -0.0409761303 -0.0032204184 -0.0481375666 0.0005694667 -0.0613784740 -0.0090236083 0.0604984040 -0.0686419278 0.0303252246 0.1257084015 -0.1565256418 0.0949886899 -0.0012637671 -0.1859518888 0.0161524070 0.1839017650 0.0409136965 0.0876136648 0.0078149515 -0.0495363875 0.1601240953 -0.1861464406 -0.0568084371 0.2944496634 0.1472605397 -0.1264641072 0.2179067114 0.0582008879 -0.0660686590 0.1691063279 -0.0282483644 -0.0074393220 -0.0273707513 -0.0600069420 0.1401094041 0.2067039470 -0.0357193111 0.0941866105 0.0929361775 -0.0041243531 -0.0152824347 -0.1258938694 0.0020709242 -0.0294742593 -0.1079250984 0.0485001595 -0.0251861672 -0.0598127733 0.0725331745 -0.0028877203 -0.0948936620 -0.0581885191 0.1537588473 0.0660597342 -0.0005903285 0.0224971809 0.0176931399 -0.1032012353 0.2269127752 0.1664144912 -0.0084896066 -0.0494644602 -0.0451809834 0.0425493702 -0.0342827814 -0.0184695466 0.0160812257 0.0132185117 0.0009123907 0.0112700314 0.0817818672 0.0396236269 -0.0026074769 0.0978564696 0.0303037559 -0.0160057499 0.0121583220 -0.0277394723 -0.0213317084 0.0048653647 -0.0261448232 -0.0089167789 0.0009073016 -0.0098174725 0.0062320595 -0.0008267282 0.0041734534 0.0067888333 -0.0063806932 0.0077575343 -0.0051310055 0.0021112763 -0.0027962189 0.0083886036 -0.0017931218 0.0137116179 0.0094090560 -0.0037531304 0.0070978250 0.0060181364 -0.0093200607 0.0045859976 -0.0150004186 0.0068529789 -0.0132623823 0.0109901173 -0.0001788986 0.0187812857 -0.0109195920 0.0091463499 -0.0208308529 -0.0030980612 0.0031524886 -0.0104720114 -0.0030628369 0.0026585267 -0.0074584580 0.0010840406 0.0005827781 0.0002666557 -0.0028308232 -0.0001125976 -0.0067721735 0.0036739862 -0.0019592002 0.0059570093 0.0037696605 -0.0005251308 0.0073707348 0.0008310951 -0.0000087456 0.0016931895 0.0016265517 -0.0019685342 0.0024963134 0.0059483139 -0.0030246050 0.0087732637 0.0066463238 -0.0006967639 0.0138646349 0.0027522562 -0.0012028022 0.0013392302 0.0021119144 -0.0027019000 0.0036667176 -0.0077051850 0.0006370847 -0.0158604863 -0.0031809058 0.0008040971 -0.0039861871 -0.0025185279 0.0222376977 0.0134366665 0.0529722483 -0.0839900519 0.0604855810 -0.0020782878 0.0051936900 -0.0104604266 -0.0028790253 0.0015803390 -0.0042819012 -0.0058655017 0.0026338560 -0.0022130627 -0.0041153050 -0.0030018443 0.0072586145 0.0049273692 -0.0028774973 -0.0158522526 -0.0062146892 -0.0094070588 0.0041240485 0.0007227519 0.0045996411 0.0011876259 0.0012874238 -0.0051497224 0.0041581749 0.0057058094 0.0002810844 -0.0032884583 0.0122263339 0.0223338912 -0.0315977582 0.0004343019 0.0026577912 -0.0086358662 0.0160416017 -0.0282247564 -0.0295551477 -0.0181892630 -0.0189714009 -0.0147000794 -0.0092789597 0.0056263080 0.0133909998 0.0171015119 -0.0264788508 0.0123712052 0.0041239227 0.0058336574 -0.0066917372 0.0031178292 0.0013300215 -0.0095602760 0.0029684141 0.0186993397 0.0079102134 0.0104131078 -0.0053244430 -0.0091066822 0.0056872803 0.0075997014 -0.0042372715 0.0056235185 0.0020657523 -0.0033385964 -0.0559047831 -0.0701591341 0.0064143951 -0.0683893551 -0.0608530586 0.0152009716 -0.0224351601 0.0291253000 -0.0057861867 0.0357263495 0.0660295020 -0.0248749278 0.0347249514 0.0197231294 -0.0038062308 -0.0071787579 -0.0670710023 0.0134591932 -0.1024786408 -0.0828176988 0.0306016540 -0.0472316339 0.0684489383 0.0040138081 0.0329668913 0.0110806432 -0.0109638619 0.0618901582 0.0291025390 -0.0026184710 0.0118438873 -0.1175998875 0.0147679873 0.0355360625 -0.1155044631 0.0338875202 -0.0187487022 0.0159656181 -0.0411946367 -0.0607079671 0.1296750210 -0.0723048515 0.0059000777 0.0536128783 -0.0208744981 0.0740203942 -0.0984796176 0.0610020732 0.0302250189 -0.1953662519 0.0631783693 -0.0263134926 0.0051310357 -0.0532803209 -0.0393696800 0.0315453861 -0.0195595679 0.0319519909 0.0829173726 -0.0342723180 0.1242796020 -0.1647014717 0.0961944926 -0.0014351759 -0.0261913729 0.0034446641 0.0513999266 -0.0446507132 -0.0041719986 -0.0110367263 -0.0497661452 0.0274651905 -0.0205307596 -0.0519462014 0.0194327023 -0.0286538796 0.0811405167 0.0166302335 -0.0414337149 0.0533121508 -0.0513401739 -0.0035465041 -0.0145583433 -0.0309073146 -0.0474630505 -0.0893878180 -0.0160703972 0.0668883330 -0.0396576945 -0.0871629059 -0.0374065442 -0.1577740202 -0.0745003472 -0.0915157968 0.0117511182 0.0444249831 -0.0647839531 -0.0443880089 0.0947851389 -0.1579139859 0.0210611362 0.0538971420 -0.0764040682 -0.0536298106 0.1675347314 0.0899576304 0.0770804646 -0.0579118604 0.0207863335 0.1087736642 -0.0332201697 0.0774256762 0.0319229688 0.0685654422 -0.0364456841 -0.0332817506 0.1289543928 0.1490736117 0.0602649146 0.1453374585 -0.1010760323 -0.0360492554 0.2270455113 0.0225934570 -0.0285217473 -0.0717459473 0.0071511180 -0.0920117706 0.0331469861 -0.0025678496 -0.0812172721 -0.1826131487 0.0009227330 -0.1673486423 0.0190377879 0.0042764255 0.0006416621 0.0054133601 -0.0016758437 -0.0061564252 0.0110414980 0.0027740388 -0.0044965232 0.0128017212 0.0183498377 0.0081028182 0.0083316023 0.0014727544 -0.0035676073 0.0074802906 -0.0015934403 0.0187746819 0.0183266948 0.0037360055 -0.0174521961 -0.0080862488 0.0014882612 -0.0205513915 0.0305351812 -0.0008055363 0.0353595222 -0.0015588740 -0.0402257789 0.0427686759 -0.0506487527 -0.0032344365 0.0504059492 -0.0235064033 -0.0042437472 0.0448840386 -0.0234085520 -0.0227180670 0.0264755081 0.0308746547 0.0769468001 -0.0438905688 -0.0257566348 0.0563826458 0.0002892095 -0.0606683420 -0.0531560386 0.0408587238 0.0393412659 0.0225827393 -0.0110378127 -0.0059147926 -0.1027208159 0.0926943630 0.1035484065 -0.0186389371 -0.1030870381 0.0321158888 0.0252040785 -0.0699652230 0.1071279063 0.0145439027 -0.0606717521 0.0533206221 -0.1079423716 0.0137413583 -0.0462364531 0.1280742252 -0.0640185206 0.0364247684 0.1112020411 -0.0968034728 0.1790689918 0.1595715444 -0.0589378950 0.2139817000 0.0632137120 -0.0263780480 0.0857944514 -0.0645526094 0.0000629681 -0.0460453227 -0.0711311065 0.0441151817 -0.0791559157 0.0447253104 -0.0383696141 0.0461726390 -0.0719357915 0.0023469657 -0.0997592134 -0.0811343812 0.0266620048 -0.0703567121 -0.0820189677 0.0723826739 -0.0880423533 0.1088531333 -0.0711172326 0.1166327873 -0.0966206145 -0.0032525718 -0.1441762506 0.0645527578 -0.0700714561 0.1327889299 0.0211615804 -0.0172842894 0.0761432740 0.0174374902 -0.0125673693 0.0738319977 0.0018965635 0.0017795877 0.0042772862 0.0127743981 -0.0015327788 0.0492401152 -0.0187530161 0.0119183820 -0.0404995309 -0.0221104875 0.0128765755 -0.0437699377 -0.0095653142 0.0057727498 -0.0043962794 -0.0143949649 0.0078202361 -0.0210446987 -0.0308413397 0.0166555466 -0.0648470894 -0.0408267160 0.0238045556 -0.0847578208 -0.0134379928 0.0081693399 -0.0053155113 -0.0210194014 0.0070764879 -0.0371608937 0.0389133255 -0.0101543907 0.1118120584 -0.0066938545 -0.0030130797 0.0223760659 -0.0103858322 -0.0491340264 0.0427529758 0.0041671838 0.0215442235 -0.0288588536 0.0309400402 -0.0470097937 0.0927865833 0.0185851455 -0.0035826038 0.0300188768 0.0084105656 0.0300302712 -0.0305403817 0.0261228055 0.0038918064 0.0004483039 0.0171170174 -0.0047423762 0.0138682120 -0.0227781474 0.0040833751 -0.0097222330 -0.0056441458 0.0036784827 0.0028417902 -0.0097757787 0.0365745162 -0.0220267190 -0.0239145812 0.0047592508 0.0260330232 0.0154824201 -0.0059923823 0.0140011092 0.0173604976 -0.0180723678 0.0299688813 -0.0047641547 -0.0029092601 0.0051353810 0.0652347426 0.0723216533 0.0756498429 -0.0018235488 -0.1205495956 -0.1326550540 -0.1903767868 0.0422055469 0.0043352079 -0.0207245844 -0.0156412595 -0.0168819968 -0.0197005763 0.0277928097 0.0333817916 -0.0258682942 -0.0041349821 -0.0050220146 -0.0365113918 0.0384424245 0.0653001900 -0.0249097519 -0.0273833543 0.0279209241 -0.0265709746 -0.0196043350 0.0297168933 0.0350243177 0.0794396828 -0.0527042857 0.0464728899 0.0647199403 -0.0557485967 0.0079183316 -0.0220443507 0.0082555764 -0.0201419903 -0.0875562824 0.0625545132 -0.0165200748 -0.0365204485 0.0333348709 0.0280347554 0.0739959303 -0.0474193724 0.0756131447 0.0897260503 -0.0756567182 0.0102195630 -0.0322517199 0.0107493556 -0.0016697223 -0.0254418774 0.0216249712 -0.0390200348 -0.0611253331 0.0488572165 0.0434080580 0.1119051359 -0.0780545449 0.0101479849 0.0286566014 -0.0210960076 0.0145834375 -0.0023348610 0.0125144674 0.0039328021 -0.0298510162 0.0220971663 -0.0155786601 -0.0088733270 0.0044252766 -0.0214742832 0.0202059122 -0.0291579680 0.0146259319 0.0503574295 -0.0291946840 0.0251987386 0.0068140741 0.0285075192 -0.0017654679 -0.0101237293 0.0049947115 -0.0283906537 -0.0149947083 0.0082619038 -0.0444987242 0.0273039961 -0.0518492297 0.0078677927 0.0292634348 -0.0128076577 0.0116336407 0.0268271021 -0.0135202296 0.0023741155 0.0152999428 -0.0103574792 -0.0154333577 0.0026251310 -0.0166795122 0.0152333308 0.0802371934 -0.0138730329 -0.0226969196 0.0835189114 -0.0105612964 0.0483109527 0.0201197779 -0.0146140850 0.0125551413 -0.0407331142 0.0029200478 0.1073892608 0.0101853847 -0.0348245568 0.0331595126 -0.0931707521 -0.0037539303 -0.0658291429 0.0367834362 0.0131747391 -0.0409738983 -0.0288733597 0.0245547947 -0.1210110989 0.0387951239 0.0077805072 -0.0699465149 -0.0704152641 0.0390786410 0.0264768903 0.0149723110 -0.0397917187 -0.0187912329 0.0317550656 -0.0203780073 -0.0015679337 0.0121921916 0.0049162775 -0.0317517455 -0.0091924753 0.0176693284 0.0050403339 0.0246088542 0.0315224249 -0.0586887162 -0.0073415772 0.0531543525 -0.0131471450 -0.0088376128 -0.0397466107 0.0003878208 -0.0361383161 -0.0251622752 -0.0207761902 -0.0228191964 -0.0698552658 0.0176585591 -0.0668169296 -0.0415367724 -0.0246110060 -0.0089171425 -0.0616548301 0.0408741335 0.0512466406 -0.1122834044 -0.0150635669 0.0335795140 -0.1425823704 -0.1645115319 -0.0774986944 -0.0863406082 -0.0011733438 0.0066792886 -0.0488211895 0.0696696477 -0.0951675173 -0.1382680651 -0.0462689758 0.0804705940 -0.0038095459 -0.0370154901 0.0860539735 -0.1491219093 -0.0005404108 0.0189396224 0.0158226217 -0.0416087776 -0.0352566836 -0.1643327065 -0.0125192714 -0.0028145526 -0.0758070132 0.0023544193 0.0334876473 0.0377528011 -0.0114416113 0.0239306742 0.0724687960 0.0692646753 -0.0438105295 -0.0432630408 0.0557348571 -0.0286117838 -0.0389912184 -0.0787556155 0.0415915341 0.0625629587 0.0160507726 -0.0076064519 -0.0045403236 -0.1672874282 0.0984860587 0.1207680996 0.0067287954 -0.0553872304 -0.0095402193 0.0141386709 -0.0494067310 0.0636329509 0.0087749356 -0.0352906429 0.0079064339 -0.0568610180 0.0464363685 -0.0147138165 0.0192475279 -0.0606049161 0.0006972859 -0.1224911268 0.0505165219 -0.1494403362 -0.1266469469 0.1019208018 -0.1944329947 -0.0608481680 0.0515548770 -0.0684721616 0.0242397272 -0.0310448342 0.0723363361 0.0597613454 -0.0169774492 0.1366233514 -0.0634000671 0.0347650503 -0.0795964904 0.0463767026 -0.0447933239 0.1133621770 0.0161690870 -0.0095843521 0.0775039848 0.0893498739 -0.0272024281 0.1900427215 -0.1154909578 0.0647239035 -0.1973869557 0.0816615897 -0.0660763312 0.1650942773 -0.0778838610 0.0263466728 -0.0895107018 -0.0333732051 0.0154570241 -0.0491984460 -0.0523229407 0.0275411509 -0.0198845981 0.0348319405 0.0192271471 -0.0178322890 -0.0096641396 -0.0272667533 -0.0325856674 0.0525720303 -0.0216118173 0.0028983428 0.0454950255 0.0178148362 0.0167812299 0.0074129482 0.0041373055 0.0040224735 0.0248248915 -0.0425739034 0.0016457305 0.0858719651 -0.0405649583 0.0019803245 0.0575607237 0.0258658261 0.0439200757 -0.0164271828 0.0202802413 0.0187826147 0.0288288109 -0.0642948523 0.0098399987 -0.0444120619 -0.0336879468 -0.0642573730 -0.0860413223 0.0525068435 -0.0805649012 -0.0939200702 0.0829347039 -0.0258319332 0.0116310094 0.0066654926 -0.0243397486 -0.0262282867 0.0242931105 -0.0586840674 -0.0102797952 -0.0026305261 -0.0269351152 0.0111744831 -0.0417587087 0.0084964834 -0.0070602298 0.0087017197 -0.0028648495 -0.0293641642 -0.0039552486 -0.0049032408 0.0132769919 0.0029163181 0.0011544517 0.0050907686 0.0024760089 0.0039808989 0.0088336663 -0.0296352211 0.0080644616 0.0050834983 -0.0150245116 -0.0210992206 -0.0665096141 -0.0163546299 -0.0031940301 -0.0077037751 -0.0309511539 -0.0371495411 -0.0295144809 0.0200445726 0.0127677572 -0.0445953086 -0.0422099919 -0.0442012980 -0.0006846799 0.0763000254 0.0560718497 0.1062264013 -0.0298627742 0.0031220031 0.0131056857 0.0151258172 0.0236229982 0.0130005294 -0.0113409957 -0.0093334095 0.0180245457 -0.0027510642 0.0044102427 0.0052029586 -0.0320887367 -0.0428109643 0.0047022725 -0.0047663423 -0.0234308855 0.0047883128 0.0065620091 -0.0214628116 0.0337783116 0.0675344167 -0.0256188135 0.0531821564 0.0615169770 -0.0388194828 0.0150113738 -0.0226856049 0.0050434318 -0.0220503100 -0.0803864545 0.0489677420 -0.0206391937 -0.0243042123 0.0201818276 0.0201608316 0.0727003630 -0.0325118532 0.0891962939 0.0906567327 -0.0608527766 0.0262703240 -0.0335647428 -0.0024606017 -0.0072240586 -0.0233766224 0.0171275696 -0.0449381767 -0.0368268838 0.0229690640 0.0263343427 0.1174906541 -0.0567290230 0.0170333080 0.0143767319 -0.0172500625 0.0173516751 -0.0040623375 0.0119812297 0.0022600064 -0.0166480367 0.0167785250 -0.0124376186 -0.0070521168 0.0019290616 -0.0062506823 -0.0008178433 -0.0229513853 0.0218186812 0.0331422218 -0.0244418438 0.0299993844 0.0036588177 0.0299949893 -0.0011092620 -0.0060413362 0.0043577290 -0.0323590840 -0.0053644330 0.0033968884 -0.0209407159 -0.0046558473 -0.0402562403 0.0113744415 0.0241619953 -0.0096264551 -0.0042401868 0.0287835972 -0.0082436208 0.0101420363 0.0040674205 -0.0003978274 -0.0118381171 -0.0033255121 -0.0104477695 0.0007725401 0.0359680631 -0.0146507928 -0.0145042307 0.0564320908 0.0295472222 0.0181882791 0.0186652041 0.0096697297 -0.0007092354 -0.0114205591 0.0200211433 0.0476606001 0.0192527926 0.0134453395 0.0137632399 -0.0319834342 0.0366739970 -0.0433706812 0.0215334340 0.0099553300 -0.0374572483 -0.0219160171 -0.0136189977 -0.0719928812 0.0183238589 -0.0048293748 -0.0596298872 -0.0580764639 -0.0463004763 0.0381303798 -0.0360768845 -0.0280995290 -0.0074884288 -0.0049976348 0.0132821197 -0.0011516868 -0.0142197921 -0.0097522545 -0.0391272859 0.0190928855 0.0162299497 -0.0172024339 -0.0110517926 -0.0079861485 -0.0941948362 0.0520472647 0.0407548234 0.0297573433 -0.0133823927 -0.0062959078 0.0229274862 -0.0044242820 -0.0096924667 0.0532647131 -0.0213968187 -0.0125194360 0.0464516761 -0.0068257937 -0.0226761618 -0.0025156209 0.0142761578 0.0461456336 -0.0694875818 -0.0207596404 0.0774018248 0.0026443194 0.0052101965 0.1125479096 0.0846909983 0.0524701106 0.0581720914 0.0098990676 0.0314063511 0.0344909342 0.0557168816 0.2881270051 0.1007499255 -0.0582143586 -0.0378914331 -0.1317564040 0.0709771358 -0.1301765084 0.2398813439 0.0167294940 0.0119071584 -0.0036890098 -0.0736153368 -0.1232195389 -0.4773069284 -0.0080627608 -0.0420234137 -0.2564789285 0.0264224295 0.0885664369 0.1032914456 0.0103370948 0.0519028799 0.1035338385 -0.0242155646 0.0226212300 -0.0068978358 -0.0057237758 0.0181261609 -0.0125074971 -0.0467893125 0.0182426846 0.0059010303 -0.0371200200 0.0207933990 0.0103660878 -0.0610384312 0.0284142336 0.0158472901 -0.0154799789 0.0192510876 -0.0074824176 -0.0047084722 0.0032491019 0.0301896265 -0.0225869131 -0.0111108508 0.0006228360 -0.0358557543 -0.0459391318 -0.0388552983 -0.0254509590 -0.0703531949 -0.0188113507 0.0196508568 -0.0041184169 0.0203511569 0.0195513562 -0.0134572351 0.0272416649 0.0107791562 -0.0058302481 0.0093168407 -0.0021044314 0.0070548754 -0.0112580945 -0.0067021249 0.0033975638 -0.0204703708 0.0122790607 -0.0030769972 0.0134107094 -0.0040804600 0.0085639469 -0.0151708391 -0.0003779040 0.0019111835 -0.0104893013 -0.0098059129 0.0042310288 -0.0257860258 0.0182986983 -0.0068682449 0.0294798951 -0.0093245889 0.0115411478 -0.0229400306 0.0117769910 0.0001279920 0.0096227791 0.0058246819 -0.0011189530 0.0046963483 0.0093431088 -0.0033124862 -0.0020337689 -0.0056738287 -0.0032898939 0.0026352074 0.0013807912 0.0044885352 0.0021314614 -0.0071818568 0.0025432551 0.0023283110 -0.0070859565 -0.0036290100 -0.0023417638 -0.0001087095 -0.0011248435 -0.0004452981 -0.0032948689 0.0065972425 -0.0003492205 -0.0114469298 0.0052122048 0.0052394078 -0.0089534985 -0.0051894465 -0.0061692124 0.0064584788 -0.0053841162 -0.0017547067 -0.0039088607 0.0105373696 -0.0015418703 0.0057415812 0.0058976377 0.0044498082 0.0195850986 -0.0111009842 0.0176740151 0.0227628713 -0.0328687995 0.0014908208 0.0088524371 -0.0558848475 0.0481542071 0.0026372687 -0.0004646786 0.0046778222 0.0009149561 0.0021851521 0.0018777038 -0.0017319886 0.0074953805 -0.0046502427 0.0017627884 -0.0040729105 0.0032983631 0.0088493971 -0.0007088627 0.0081330065 -0.0066661696 -0.0029231527 0.0007259264 -0.0009059229 0.0000392763 -0.0008065696 0.0001120711 0.0040152953 0.0003219672 -0.0017129091 0.0023900543 0.0036936628 0.0209948671 -0.0014398989 0.0103855362 0.0015076312 0.0059525894 0.0219673784 0.0041156731 -0.0063150225 0.0018149877 -0.0099329619 -0.0044057184 -0.0004125400 -0.0081120560 -0.0000466032 -0.0012541739 -0.0077825608 -0.0060306182 0.0035588019 -0.0024862482 -0.0035950599 -0.0090121932 -0.0026847554 0.0035807409 -0.0007383683 -0.0033983014 0.0059923483 0.0013027336 -0.0012722321 0.0045432194 0.0065597813 -0.0025010934 0.0002234401 0.0020370344 -0.0032557115 0.0002467696 0.0052221314 -0.0224224415 -0.0266867939 0.0932070896 -0.0115156638 -0.0581351672 0.0999443018 0.0179157004 0.0079901172 -0.0168432703 0.0245500961 0.0926111457 -0.0999275553 -0.0197014442 0.0449496597 -0.0292546443 -0.0566306360 -0.0450075448 0.1060236145 -0.0081042930 -0.1075667242 0.1558703647 0.0337419484 -0.0178394408 -0.0226295151 0.0099565132 0.0239983965 -0.0377416594 -0.0459918110 0.0597741152 -0.0547905782 -0.1023348642 -0.0729090532 0.1624006473 0.0102478329 -0.0951757463 0.0401257423 -0.0227854598 0.0043732462 -0.0246197693 -0.0363462497 0.1078209229 -0.0532793383 0.0161904650 0.0324155712 -0.0134731896 0.0570728270 -0.0770650899 0.0543980636 0.0136823311 -0.1638926972 0.0645879290 -0.0345163781 -0.0200395768 -0.0463377989 -0.0104461236 0.0388241586 -0.0091102569 0.0409675335 0.0407369135 -0.0189579634 0.1090778330 -0.1256208910 0.0969521796 0.0436992643 -0.0421126042 0.0172833703 -0.0373847030 -0.0179382723 0.0259310971 0.0128060589 -0.0235043100 0.0273150085 0.0085106761 -0.0247740129 0.0267328241 0.0554944965 0.0682492135 -0.0391878868 0.0352165837 0.1244125356 0.1087488863 0.1217466499 0.0521058253 0.0771767250 0.0900519701 -0.0180292760 0.0280155954 0.1899456422 0.0762237221 0.1408069809 0.1131965874 -0.0444031635 0.0615406480 0.0028779611 0.0640413350 0.0429063267 0.0067564472 -0.0662569373 -0.1098203706 -0.0434248478 0.0624757137 0.0320565018 -0.0571511490 -0.1772262206 -0.2603544004 0.0018683752 -0.0271972343 -0.0434900813 -0.0108230453 -0.0139831531 -0.0368837713 -0.0079226790 -0.0190969537 -0.0625063094 -0.0459856918 0.0041767487 -0.0455843382 -0.0147759794 -0.0218189278 -0.0653030008 -0.0739050385 0.0183491609 -0.0298922240 -0.0105280129 -0.0169674666 -0.0477779753 -0.0424014093 0.0056679452 -0.0441257546 -0.0057064819 -0.0162233182 -0.0453245973 -0.0589700093 0.0255634612 -0.0311969757 0.0037626526 -0.0032810113 -0.0068811095 0.0165256415 -0.0013005504 -0.0091731937 0.0002840600 -0.0072202095 -0.0170121051 -0.0039258542 -0.0050856649 -0.0068007363 -0.0020769599 -0.0048165229 -0.0021449411 -0.0156793668 -0.0474306310 -0.0087467740 0.0142333924 0.0023994570 0.0261673123 -0.0111282465 0.0205317629 -0.0343138226 0.0000060002 -0.0038435313 0.0012156853 0.0058940662 -0.0050945715 0.0094869545 0.0009694650 -0.0059867923 0.0062040608 -0.0004219146 -0.0049961557 0.0015488399 0.0007196485 -0.0022942619 -0.0008688007 -0.0069156305 0.0051409473 0.0011906057 -0.0041072508 0.0000071717 0.0043355095 -0.0000118665 0.0018526164 -0.0032305781 -0.0054779031 0.0034581370 -0.0000760186 0.0031200572 -0.0009686217 -0.0065964892 0.0061140723 0.0149198974 -0.0041673368 -0.0045995888 0.0088668337 -0.0070836567 -0.0019294085 0.0042416968 -0.0045728279 0.0102756072 -0.0003279263 0.0057641406 -0.0021808670 0.0025169707 -0.0055689467 0.0113256164 -0.0042895627 0.0110820428 -0.0020959317 -0.0029351270 0.0076946253 -0.0024900761 0.0003715876 0.0028561754 -0.0024592771 0.0054005505 -0.0115127272 0.0007724937 0.0001830746 -0.0019299310 -0.0023704581 0.0025976644 0.0030308329 -0.0024098665 0.0062338200 -0.0019933447 0.0016773087 0.0030047566 -0.0056427829 0.0034059971 -0.0056342051 0.0005122749 -0.0011975054 0.0017443955 0.0084625183 -0.0025275583 0.0114756573 -0.0004749182 -0.0018994601 0.0025120548 -0.0112647982 -0.0241522982 0.0080970933 -0.0384445061 -0.0441240581 0.0272829374 -0.0683615625 0.0141757481 0.0082116607 -0.0094122081 -0.0078019833 -0.0056735606 -0.0190681365 0.0256224212 -0.0070414473 0.0114130209 0.0183553343 0.0081504778 0.0111280096 0.0055391766 0.0027798787 0.0117865289 0.0089465701 -0.0139008002 -0.0020085992 0.0440717522 -0.0165609944 0.0239328515 0.0173616199 0.0139879791 0.0111610717 -0.0009090613 0.0077846694 0.0202724780 0.0081761903 -0.0230130459 -0.0041510125 -0.0275062053 -0.0064939885 -0.0448473368 0.0048031145 0.0006764660 0.0073231908 0.0043331000 -0.0003517748 0.0017228567 0.0005532717 -0.0055322749 0.0031655868 -0.1017769536 -0.0181109796 0.0235730131 -0.0172098460 0.0124744657 0.0053612097 0.1033709224 -0.0979444199 -0.1183090170 0.1246499946 0.0716008040 0.0161667018 -0.0248122929 -0.0625947172 -0.0095824521 -0.0338323063 -0.0003257753 -0.0496525206 0.0080697625 0.0546162293 0.0523240467 0.0090057062 0.0610227416 0.0333808216 -0.1458198550 0.0249506243 0.0753582087 -0.2130642339 -0.1060461415 -0.0163778017 0.0916388548 -0.2910463104 -0.0736807972 -0.1273307451 0.0304977949 0.0120876203 -0.0515981970 -0.0116341597 -0.0308204969 -0.0523208743 -0.0256814777 -0.2592983556 -0.1835264348 -0.0887995058 0.0646847066 -0.0348640173 0.0067688816 0.0249651783 -0.0294525879 0.1213901300 0.1268534687 -0.0250669886 0.0116893411 0.0254363053 -0.2036250213 0.0733191225 0.1204222608 -0.1747768016 -0.0973214890 0.0197309434 -0.1978012643 0.0662300349 0.1247981665 -0.0022654936 -0.0070375380 0.0024772134 -0.0050772848 -0.0069770033 0.0046846631 -0.0025436276 -0.0008268381 0.0032774817 0.0011905425 0.0053980441 -0.0014507594 0.0025372910 0.0021775191 -0.0010294217 -0.0008837162 -0.0067338604 0.0026914603 -0.0098024061 -0.0112121508 0.0078510543 -0.0049147009 -0.0027515753 0.0068185475 -0.0005936569 0.0016140360 -0.0004152939 0.0062873551 0.0055533529 -0.0028390042 -0.0003826430 -0.0095776890 0.0033664967 0.0030509185 -0.0130299036 0.0041119297 -0.0021534458 0.0003814618 -0.0021022753 -0.0008685877 0.0051017025 -0.0038814352 0.0029464026 -0.0007789748 -0.0009732433 0.0030554604 -0.0028182735 0.0024253167 0.0049241308 -0.0216110356 0.0070451207 -0.0049932859 0.0049087171 -0.0042282311 0.0003394717 0.0020945811 -0.0013686619 0.0050366180 -0.0012615483 -0.0010542925 0.0042674561 -0.0005744717 0.0043453556 -0.0035653630 -0.0006861173 0.0005026281 0.0010062143 -0.0030117306 0.0005637339 0.0003486643 -0.0020288360 0.0009199650 0.0025392893 -0.0010271939 0.0020511626 -0.0018042232 -0.0099483599 0.0034305456 0.0021619426 -0.0107294559 0.0008857602 -0.0066500624 -0.0032055265 0.0008257887 -0.0023196262 0.0044231004 -0.0013779127 -0.0145697674 -0.0026886432 0.0015296300 -0.0051803648 0.0101203542 -0.0024872059 0.0077296058 -0.0048023510 -0.0009814211 0.0047819531 0.0040758684 -0.0009025725 0.0150517367 -0.0051130171 -0.0005816135 0.0087741109 0.0100130948 -0.0008086038 0.0004631882 0.0000021271 0.0006420334 0.0013025919 -0.0005679475 -0.0015380714 0.0028884546 -0.0002468175 -0.0021404661 -0.0002875016 0.0015640522 -0.0003029679 0.0044944895 -0.0015014528 -0.0040380007 -0.0008115324 0.0016255262 0.0003522242 0.0018892445 -0.0006654730 -0.0018826918 -0.0024199086 0.0020999579 0.0003642536 0.0036346543 -0.0012161415 -0.0022481158 -0.0051875412 0.0035060666 0.0021652316 -0.0052309329 -0.1550479157 -0.0582915467 0.2010544906 -0.1829410478 -0.0489298075 -0.0979681436 -0.2984431637 -0.1831176864 -0.0117026580 -0.1129772988 -0.0259801508 -0.0569651026 0.0710326140 0.0799311250 -0.0233483105 0.2118012646 0.1098874553 -0.1346081844 0.0902957660 0.0195167058 0.0467319012 0.0024165173 0.1496734416 0.0104420647 0.0316542102 -0.0517610731 -0.0475921978 0.1528588709 0.0572941126 0.0010935245 0.1215533771 -0.0124829811 0.0097506694 0.0375847428 -0.0701677173 0.0191826228 0.0082469878 -0.0955835696 -0.0067351012 -0.0134254572 0.0509755856 -0.0329744003 0.0436645004 -0.0002380861 0.1424290416 -0.1341195707 -0.0665674006 0.0402817102 -0.0450256029 0.0207501403 0.2538180283 -0.1992879336 -0.1293174680 -0.0472173111 -0.1324257140 0.0575686518 0.0618277627 -0.0367019659 -0.0038875967 0.0292709970 -0.0365396044 0.0283018407 -0.0066880571 -0.0467626006 -0.0221326407 0.0826194991 0.0733391755 0.0575118754 -0.0486061039 0.0046196786 -0.0404421442 -0.0269547929 0.0371593309 -0.0483823016 -0.0175644336 0.0188377370 -0.0152964815 -0.0061651710 -0.0173474187 0.0252205914 0.0119215697 0.0012407907 0.0523917660 -0.0242893998 0.0072234463 -0.0330760771 0.0047034322 -0.0248304790 0.0333516495 -0.0140918981 0.0008032388 0.0209358829 0.0239524231 0.0039779817 0.0764868403 -0.0344081148 0.0143231298 -0.0765348060 0.0177431818 -0.0378902529 0.0503966507 -0.0292661268 -0.0057963998 -0.0144647500 -0.0123014403 0.0026863276 -0.0016549022 -0.0247083676 0.0110253125 0.0184353990 0.0219257811 0.0121269046 -0.0064239378 -0.0022257811 -0.0147623054 -0.0040069679 0.0257115165 -0.0080237128 -0.0083183906 0.0188542693 0.0154729315 -0.0034645336 0.0013151323 0.0055538912 0.0020400950 0.0092810251 -0.0209536680 -0.0068114137 0.0413934417 -0.0175374125 -0.0153327474 0.0191973518 0.0259542359 -0.0017426323 -0.0094082105 0.0127518083 0.0094118487 0.0084664608 -0.0338688721 -0.0096170739 -0.0151245171 -0.0212785107 -0.0036957869 -0.0500791158 0.0292717031 -0.0431558806 -0.0598842050 0.0506335186 0.0044730321 -0.0424888856 0.0582036730 0.0254916931 -0.0037881606 -0.0021871605 -0.0053419213 0.0007027375 -0.0033465531 -0.0098425320 0.0101209284 -0.0166683061 -0.0140499033 0.0032174847 -0.0007585600 0.0050015139 -0.0098912304 -0.0112395135 0.0073077714 -0.0166987556 0.0029295412 0.0019692646 0.0009258224 0.0032778890 0.0016119273 0.0049493194 -0.0085322818 -0.0038694413 -0.0046942383 -0.0108576354 -0.0058743175 -0.0395147362 -0.0279083237 0.0128862364 0.0065094383 -0.0301396504 -0.0189342942 -0.0094473673 0.0115216877 0.0245179856 -0.0463091729 -0.0172657513 -0.0024027698 -0.0266708756 0.0384970964 0.0013324343 0.0043999732 -0.0098077127 0.0067526654 0.0014151389 0.0018763022 -0.0056441081 0.0007919640 0.0043971099 -0.0032246621 0.0015675759 0.0118898911 0.0054885746 -0.0085845210 -0.0097396103 -0.0055578234 -0.0060343147 -0.0166059376 -0.0085249550 -0.0073445255 -0.0056269999 -0.0033592678 -0.0424385045 -0.0475776841 0.0374817183 -0.0550467782 -0.0730764539 0.0595661823 -0.0102590140 0.0201683927 -0.0135983669 0.0329069589 0.0920768232 -0.0717464329 0.0059120616 0.0254617620 -0.0127837127 -0.0373900149 -0.0696956914 0.0607765433 -0.0772951682 -0.1209910117 0.1072270091 -0.0200683746 0.0316661570 -0.0080747611 0.0251328956 0.0226589826 -0.0279140771 0.0059564997 0.0269477967 -0.0146560515 -0.0510241278 -0.1211740172 0.0948711719 -0.0710433196 0.0853789585 0.0038910868 -0.0092195244 -0.0226692379 -0.0016424392 0.0509496747 -0.1034578284 0.0149870515 0.0179126136 0.0010527934 0.0073446329 -0.0485125282 0.1028988245 0.0136141306 -0.1139596594 0.1237535565 -0.0063042200 -0.0214872949 -0.0318840050 -0.0197479759 0.0220230151 -0.0411349422 -0.0073365456 0.0379593497 0.0182699781 -0.0013569956 -0.0673978083 0.1739596514 0.0159941950 0.0229990079 -0.0369274970 0.0116711143 0.0094848572 -0.0350810441 0.0121042311 -0.0539752017 -0.0056085982 -0.0303189352 0.0371670602 0.0444049872 0.0020106178 0.0335258190 0.1319701333 -0.0435181616 -0.0149201204 0.1137475715 -0.0556564946 0.1015708383 0.0308647805 -0.0267392398 0.0517563572 -0.0637309109 -0.0027267566 0.2057323763 0.0206335419 -0.0452265616 0.0823370423 -0.1361674737 -0.0065643694 -0.0717278113 0.0579321057 0.0011158824 -0.0252030763 -0.0440317535 0.0319980525 -0.1661763752 0.0668585637 0.0120938604 -0.0678668391 -0.1036014926 0.0722802289 -0.0913252498 0.0393727104 0.0370457953 -0.0088242255 -0.0118151105 -0.0023908494 -0.0677308561 0.0160092405 0.0279295609 0.0671204701 -0.0561941591 -0.0563993947 -0.0773294007 0.0234205351 0.0379401033 0.1831560069 -0.1130481670 -0.1289216225 -0.0878961607 0.0308645861 0.0446703456 -0.0132576198 -0.0113439456 -0.0016464255 -0.1510969579 0.0621895703 0.0801860267 -0.0109483960 -0.0114610158 -0.0030814292 -0.0150490651 0.0145103208 0.0158096526 -0.0543423348 0.0170839926 0.0161177189 -0.0001680322 0.0358209898 0.0433534326 -0.0055377431 0.0100526217 0.0107869084 0.0129271558 0.0256302917 0.0119648124 0.0724345367 0.1756154893 0.0272435066 -0.0562157901 0.0062238320 -0.0913326331 0.0489632013 -0.0614394812 0.1215108129 -0.0005031341 -0.0032633800 0.0030659563 0.0115787221 -0.0077355073 0.0184228845 0.0040154904 -0.0090320952 0.0137355819 -0.0020142460 -0.0028186154 -0.0002713613 -0.0028557801 -0.0000432434 0.0037686006 -0.0141403392 0.0125805071 0.0101005046 -0.0098431015 0.0084369235 0.0061836877 0.0004029154 0.0059005910 -0.0098526099 -0.0121071415 0.0084177939 0.0006935989 0.0142925387 0.0006281653 -0.0133531606 0.0030763837 0.0185371923 0.0060229944 -0.0081089118 0.0094175605 0.0059794005 -0.0013256084 0.0039460524 0.0036023890 0.0030121690 -0.0096948050 -0.0009605223 0.0155485173 -0.0125985876 -0.0048212694 0.0123563957 -0.0098535236 0.0227505159 0.0456113732 -0.0250767350 0.0635824387 0.0187565549 -0.0102294298 0.0200911341 -0.0209172118 0.0102143031 -0.0325791379 -0.0080924148 0.0057561814 -0.0210428972 0.0081473559 -0.0029682634 0.0002152643 -0.0198556875 0.0109350731 -0.0360930435 -0.0146483393 0.0071903576 -0.0305650373 -0.0007487236 0.0032034601 -0.0082952251 0.0206619653 -0.0098044969 0.0198561577 -0.0273833026 0.0133779279 -0.0475752775 0.0105922995 -0.0089092370 0.0172574252 0.0125422267 -0.0097732834 0.0237939698 0.0066907687 -0.0038124661 0.0153592498 0.0024023050 -0.0017809363 0.0065387510 0.0019196457 0.0042050356 0.0145801656 -0.0049701256 0.0057382870 -0.0087253000 -0.0079184685 0.0032785561 -0.0086727256 -0.0059383662 0.0035529617 -0.0036033226 -0.0036168199 0.0058259867 -0.0035744867 -0.0122240863 0.0089305311 -0.0181238748 -0.0125877320 0.0074655715 -0.0191138985 -0.0067082160 0.0032283908 -0.0097127161 -0.0059201398 0.0048902304 -0.0089882533 0.0091456624 0.0023070874 0.0304457737 0.0170783930 -0.0092555685 0.0152066449 0.0175589339 -0.0249103334 0.0023788218 -0.0002319498 -0.0064340288 0.0031521375 0.0149670305 -0.0203865922 0.0058375127 0.0058381770 -0.0160197970 -0.0149394248 0.0107086538 -0.0323961584 -0.0113440065 -0.0118391515 0.0022786569 0.0020513048 -0.0386552487 -0.0138936002 -0.0007460278 0.0017068397 -0.0010755041 0.0052706047 0.0021592535 0.0025742229 0.0020118578 0.0062464078 -0.0281310500 -0.0210469532 0.0126934122 -0.0328041715 -0.0252383479 -0.0961068560 -0.0424191345 0.0080681790 -0.0054810383 -0.0380471471 -0.0712885492 -0.0159269285 0.0313943336 0.0435195180 0.0163134188 0.0084824279 -0.0013638380 0.0068291715 -0.0186560381 0.0064638674 -0.0062394898 -0.0022797789 0.0083858260 0.0115406603 0.0132587214 0.0088318693 0.0099498951 -0.0104092813 -0.0155105737 0.0122417593 0.0106204299 0.0076835604 0.0120222811 -0.0346705439 -0.0278397027 0.0158519483 -0.0273235899 -0.0186776560 0.0180318779 -0.0340620392 -0.0301059271 -0.0002407343 -0.0035308265 -0.0037370646 -0.0032879775 -0.0024287839 -0.0020414486 -0.0012676144 0.0030540616 -0.0005150073 0.0003404784 0.0028343455 0.0007482462 0.0023448333 -0.0016285658 0.0008457867 0.0014646871 -0.0038455052 -0.0033158725 -0.0078567462 -0.0041438015 -0.0019217591 -0.0026016522 0.0051785705 -0.0000243430 -0.0009475628 0.0014595467 0.0007862105 0.0056738032 -0.0030600074 0.0036470867 0.0031270811 -0.0063593847 -0.0039414135 0.0030596092 -0.0156913593 0.0039328344 -0.0028606409 0.0007253983 -0.0036498308 -0.0055458628 0.0166784037 -0.0085908562 0.0037181564 0.0009831051 -0.0024887474 0.0087222675 -0.0115058766 0.0047229877 0.0075418157 -0.0292505523 0.0084976247 -0.0007179975 -0.0024869735 -0.0019593727 -0.0016677609 0.0077008205 -0.0026250960 0.0082066927 -0.0025050178 -0.0017454214 0.0161003815 -0.0185425619 0.0106175840 -0.0046947698 0.0006996716 0.0002300474 0.0009942376 -0.0011311011 0.0000068565 0.0015756451 -0.0026187060 0.0034445175 0.0002959759 -0.0016282419 0.0019245953 0.0011225494 -0.0140964846 0.0066640513 0.0051065082 -0.0158904793 -0.0004241916 -0.0057253777 -0.0050028090 -0.0000470923 0.0009967389 0.0064009377 -0.0041891713 -0.0178620518 -0.0047502771 -0.0003436882 -0.0035716615 0.0140707120 -0.0078920837 0.0146865770 -0.0066440627 -0.0021322983 0.0113039747 0.0070326288 0.0000001243 0.0263199107 -0.0068706664 -0.0007118211 0.0173488732 0.0162618822 0.0030651139 -0.0005400277 0.0103336571 -0.0040109755 -0.0010540803 0.0067865649 -0.0141913686 0.0071691869 0.0051568061 -0.0069677452 -0.0032047022 -0.0012798646 -0.0036696449 0.0154475036 0.0039983170 -0.0062239949 -0.0013703376 -0.0071485099 0.0032571850 -0.0056652234 -0.0018384850 -0.0172484843 -0.0143970801 -0.0015557704 -0.0073518749 -0.0074129753 -0.0047983814 -0.0237888459 -0.0237132157 -0.0035527107 -0.0029522782 -0.0441623930 0.0552418540 0.0481695182 -0.1775066089 0.0847156563 0.0331385400 0.0163697233 0.1492332697 0.1325647143 -0.0412841961 0.0186984152 0.0208849176 0.0591462489 0.0547110164 0.0457671713 0.2866798197 0.5717118546 0.0821284402 -0.1861059883 -0.0241871949 -0.3369190451 0.1382928516 -0.2454876374 0.4302770362 -0.0241858872 -0.0188174078 0.0365050739 0.0216540330 -0.0906514031 -0.0001066548 -0.0036942138 -0.0763657425 0.0317088238 -0.0031082846 0.0086734244 -0.0072016001 -0.0177328235 0.0037025328 0.0624783922 -0.0461346345 0.0517800733 0.0259872583 -0.0606281752 0.0780714454 0.0095717388 0.1349400539 0.0120808487 -0.1515050605 -0.0327019940 0.0344269272 -0.0158201395 0.3023929607 -0.0432960166 -0.1797994457 0.0224052921 0.0067055940 -0.0026752866 0.0215563470 -0.0629012149 0.1218896367 0.0329650603 -0.0181794409 0.0128473469 0.0089101573 0.0306961704 0.0188696541 0.1011403278 -0.1098087113 -0.0246125420 -0.0644641293 0.0039758035 -0.0349352153 -0.0219179801 0.0487158207 -0.0526172986 -0.0152277246 0.0252031996 -0.0147198433 -0.0092221411 -0.0178003296 0.0326549906 0.0042409609 0.0095941111 0.0520162269 -0.0154930725 0.0038805841 -0.0228961585 0.0089334505 -0.0308237065 0.0407870380 -0.0201266320 0.0055582384 0.0271946173 0.0145064555 0.0182714239 0.0761267292 -0.0222747751 0.0093042228 -0.0676087920 0.0237265788 -0.0486596436 0.0587778543 -0.0405556357 -0.0094700902 -0.0101831870 -0.0163743739 0.0006510208 0.0097019675 -0.0270477795 0.0063534252 0.0435683653 0.0224219684 0.0136517304 -0.0068932478 0.0013930362 -0.0191766236 0.0014836479 0.0243934019 -0.0080632740 -0.0159648041 0.0200246280 0.0168763186 -0.0100143455 0.0016327275 0.0049135025 -0.0010468797 0.0088158573 -0.0232890658 -0.0095615684 0.0408066263 -0.0182804343 -0.0273604559 0.0204638951 0.0266061577 -0.0087710675 -0.0151080030 0.0161011921 0.0084612032 0.0080851871 -0.0362656086 -0.0124224743 -0.0076480918 -0.0272012478 0.0115114437 -0.0397971906 0.0288641843 -0.0457802714 -0.0493789048 0.0168450263 -0.0291789415 -0.0350451464 -0.0133927405 0.0962630388 0.0008606381 -0.0018325820 0.0084293592 -0.0004895802 0.0005738894 0.0081027899 -0.0062524022 0.0102999483 0.0053825876 0.0016214120 0.0001003104 -0.0025631445 0.0075676183 0.0064844419 -0.0009685107 0.0034135339 0.0029183416 -0.0009037415 -0.0000184874 -0.0014375257 -0.0008691510 -0.0055233879 0.0070661782 0.0022119154 0.0001804250 0.0077528893 0.0046099216 0.0261374196 0.0175925926 -0.0052807656 -0.0023105075 0.0165059635 0.0161229031 0.0032156138 -0.0063817116 -0.0125697694 -0.0110195679 -0.0079573386 -0.0048658047 0.0007253171 0.0181957547 0.0119530770 0.0243594682 -0.0008900450 -0.0034069358 -0.0011880439 -0.0014929615 0.0032219598 -0.0004088353 -0.0011776146 0.0025891844 -0.0000810849 -0.0068026374 -0.0031994550 0.0012938647 0.0082953750 0.0056109139 0.0013346874 0.0100504056 0.0073885492 0.0023826898 0.0047764283 0.0025533727 0.0116448698 0.0233684550 -0.0261320079 0.0185067966 0.0300127762 -0.0362186406 0.0053562819 0.0037390703 -0.0049482209 -0.0126924653 -0.0487481717 0.0415207180 -0.0033851793 -0.0216969879 0.0178868982 0.0219448397 0.0406100518 -0.0413385910 0.0282654655 0.0461818969 -0.0531828303 0.0083953527 0.0211580969 -0.0164119439 -0.0048236307 -0.0143144866 0.0172182956 -0.0070931743 -0.0350158011 0.0297931278 0.0390012596 0.0659948140 -0.0686467964 -0.0492458793 -0.0645817406 0.0743330881 -0.0424371948 -0.0167287425 -0.0327386263 -0.0123073959 0.0680582983 -0.0634120254 0.0443741930 0.0358375819 -0.0041800903 0.0380846366 -0.0234349034 0.1029786597 -0.0790832970 -0.1414332352 0.1047275284 -0.0704754866 -0.0689699317 -0.0825200856 -0.0007835968 0.0197909708 -0.0243860820 0.1104059213 0.0504957718 -0.0168733065 0.1020899566 -0.0333049032 0.1714643622 -0.0081244339 0.0184994268 -0.0062406367 0.0090103294 0.0128112148 -0.0077421004 -0.0313472681 -0.0405606853 0.0089470415 0.0391505277 -0.0016051705 0.0348984017 -0.0062151590 -0.0707227877 0.0341744766 0.0291618161 -0.0678729775 0.0156669889 -0.0390397065 -0.0168998863 0.0257374685 -0.0150613402 0.0231610947 -0.0142036231 -0.0895358879 -0.0076564911 0.0450862443 -0.0365647659 0.0599445245 -0.0307233663 0.0645414644 -0.0368642491 0.0118002173 0.0378975821 0.0156866701 -0.0170495065 0.1136492333 -0.0337944548 0.0281069708 0.0655998398 0.0550523651 -0.0339746901 -0.0426163798 0.1673692503 -0.0152967422 0.0021145156 0.1093897505 -0.1385183410 0.0178434393 0.1041024108 0.0178233637 0.0510303237 -0.0692998584 -0.0347100374 0.0868555654 0.1253866221 0.0834193911 0.1684220916 -0.1864573497 -0.0102272480 -0.1398244813 0.0308465402 -0.1180608244 -0.1113377260 -0.0552498005 -0.0561869861 -0.2514958127 0.0266607633 -0.1712763318 -0.1817852818 -0.1146523940 -0.0332761415 0.0041966276 -0.0103595725 -0.0155365268 0.0360329447 -0.0121818656 -0.0159915103 -0.0058884514 -0.0221563809 -0.0423146909 -0.0144952992 -0.0089587845 -0.0112372581 -0.0140573309 -0.0121046185 -0.0244213577 -0.0476851467 -0.1325600683 -0.0466034744 0.0315068593 0.0116379590 0.0584830368 -0.0390274847 0.0584616671 -0.1125939522 0.0272438985 0.0210306945 0.0248405100 0.0350391093 0.1380892019 0.2667098452 0.0463118699 0.0965233825 0.1642477314 0.0028781592 0.0257321987 0.0152678371 -0.0045823240 0.0373736657 0.0534436062 -0.0436391099 0.0530508568 0.1005769627 -0.0131715186 0.0272576893 0.0445996778 -0.1028439988 -0.0157605531 0.0369628542 -0.0606502832 0.0182775210 0.0241548538 -0.1069484717 -0.0224337947 0.0238269156 0.0279874236 0.1151561886 0.1161737261 -0.0536387580 0.1009887250 0.0703820697 0.0073335076 0.0266486614 0.0561971780 -0.0204361425 -0.1138948629 -0.0706651415 0.1344586898 -0.1309320305 -0.0117658844 -0.0912712711 0.0089469842 -0.0440041491 -0.0151819375 0.0577276702 -0.0520557799 -0.0138631076 0.0309552617 -0.0145304896 -0.0175374107 -0.0168747053 0.0324198805 0.0012671419 0.0150063063 0.0583898266 -0.0144538859 0.0041662404 -0.0252842255 0.0073861889 -0.0346483991 0.0416056442 -0.0287154733 0.0095873580 0.0274952130 0.0165424932 0.0262788623 0.0934771815 -0.0159749728 0.0073228563 -0.0705407864 0.0242316165 -0.0573179751 0.0613050935 -0.0518128893 -0.0133964707 -0.0065548818 -0.0138219580 -0.0041840855 0.0292071060 -0.0278945697 0.0034168628 0.0739360219 0.0296031933 0.0165211382 -0.0037583886 0.0046394607 -0.0233045121 0.0099315708 0.0280492704 -0.0077774563 -0.0247699765 0.0215576902 0.0224628079 -0.0182313344 0.0003221802 0.0074616298 -0.0038213724 0.0091116286 -0.0267662549 -0.0155121695 0.0457772145 -0.0194177254 -0.0435845142 0.0194721213 0.0377914843 -0.0223893422 -0.0193888398 0.0199540057 0.0040566303 0.0063720844 -0.0426077192 -0.0234022877 -0.0022731862 -0.0345746345 0.0324566078 -0.0341022322 0.0297441005 -0.0535140246 -0.0457815355 -0.0015857752 -0.0417177190 0.0127567129 -0.0271222348 -0.0595474852 0.0036542696 -0.0047438953 0.0127614248 0.0011286711 -0.0003799908 0.0085467729 -0.0032915021 0.0087078338 0.0005925572 -0.0000668753 -0.0017998293 -0.0016365826 0.0078590124 0.0060867102 0.0128367659 0.0078080929 -0.0001326193 -0.0004581538 -0.0001784788 -0.0030006795 -0.0019858161 -0.0042292672 0.0090350922 -0.0007222913 -0.0022872224 0.0065505212 0.0061691614 0.0251927905 -0.0019013727 0.0203203879 -0.0025445909 0.0172021124 0.0302237148 -0.0000981899 0.0043893398 0.0079064170 -0.0114524004 -0.0140130586 -0.0098569465 0.0021453100 0.0258130502 0.0195694603 0.0290554867 -0.0003928351 -0.0064691610 -0.0020040959 -0.0041137797 0.0006227039 -0.0010457595 -0.0016917190 0.0002501656 0.0001951827 -0.0068399026 -0.0035520017 -0.0032043134 0.0102727629 0.0106641312 -0.0017225567 0.0041295314 0.0079229992 -0.0012718737 0.0018652692 0.0053046555 -0.0269092915 -0.0778342432 -0.0653879159 -0.0882241594 -0.0841112571 -0.0193877879 -0.0323516566 0.0548772623 -0.0151114137 0.0205328662 0.0751735510 -0.0088747705 0.0411429656 -0.0275710746 0.0142500557 0.0106696840 -0.0910407042 -0.0517798316 -0.1733783155 -0.1279779364 -0.0015855216 -0.0670691667 0.1210179150 -0.0080538631 0.0028311131 0.0315292762 0.0062488061 0.0970025898 -0.0625164782 0.0715899011 0.0446339594 -0.1519279487 -0.0610369053 0.0534076930 -0.0481377722 -0.0269207240 0.0085514344 0.0204513254 0.0112955936 -0.0258407568 0.0549628241 0.0097416674 -0.0168793011 -0.0329157407 -0.0052497708 0.0178873637 -0.0619396359 -0.0515007812 0.1093678975 -0.0624606769 -0.0265415578 0.0217089180 0.0369319864 0.0319449268 -0.0018874485 0.0319960406 0.0209005430 -0.0487760739 -0.0752003163 0.0134156305 0.0154353578 -0.1012907633 -0.0675970890 -0.0630104736 -0.0009393339 0.0090068235 0.0369610647 -0.0323396213 0.0015494795 0.0653648407 0.0253955451 0.0279711380 -0.0226165892 -0.0224090660 0.0002123160 0.0504872116 0.0455915611 -0.0080915644 0.0047826287 0.0060042100 -0.0874324802 0.0656105564 -0.0293732537 -0.1208863656 0.0810083075 -0.0015061009 -0.0026831172 0.0762475748 -0.0687303062 -0.2190812650 0.0913336440 -0.0133894165 0.0112172330 0.0061793268 -0.0029969584 -0.1077603784 0.0619547928 0.0341091804 0.0872931865 -0.0194170379 -0.0177214587 -0.1466968924 0.0671602188 0.0557851098 0.2325142760 -0.0046633852 -0.0571259432 -0.0169902375 -0.0443313843 -0.0525305059 -0.0133934949 -0.0016907528 -0.0387429336 -0.0967913511 -0.0809585157 0.0376388714 -0.0538576979 -0.0098450801 -0.0701040924 -0.1597619035 -0.1363563369 0.0698941797 -0.0291162267 0.0251103810 -0.0444875103 -0.0590312621 -0.0490150508 0.0283712076 -0.0639943418 0.1010686685 -0.0556295841 -0.0516427903 -0.0513993734 0.0636580432 -0.0549273389 0.0009965490 -0.0069251715 -0.0152979553 0.0286544278 -0.0047682987 -0.0185598558 -0.0051403826 -0.0111725876 -0.0414123538 -0.0239534007 -0.0101208761 -0.0133845551 -0.0112282567 -0.0095265858 -0.0259320364 -0.0295728886 -0.1080993089 -0.0505823148 0.0192756950 0.0124245614 0.0380711708 -0.0349057302 0.0495953401 -0.0990471238 0.0105883846 0.0018687273 0.0830619638 -0.0778298696 0.0736611852 0.0766893410 -0.0060875752 0.0702387235 0.0813532724 0.0426340115 0.0436986830 0.0759741540 0.0149703063 0.0156942284 0.1385103407 0.0856607926 -0.0151915331 -0.1084614671 0.0811285421 -0.0453601927 -0.0313021789 0.0632332052 -0.0563404940 -0.0515757570 0.0517515821 -0.0015891560 -0.0410198936 0.0149554840 -0.0718409159 -0.0944803736 0.0743859203 0.1043208418 -0.1009422025 0.0142305743 -0.0476254273 0.0715794181 -0.0251293497 0.0073691811 -0.0225472622 -0.0729492394 0.0614295549 -0.0481707360 -0.1641415895 -0.0801207064 -0.0296224933 0.1354005618 -0.0244642109 0.0676207428 0.0148086915 -0.0393653463 0.0431768681 0.0136848285 -0.0177396241 0.0129755801 0.0188076110 0.0080342385 -0.0158050040 0.0051589720 -0.0083271865 -0.0389788567 0.0089158983 0.0035955392 0.0139148053 -0.0058441541 0.0248543575 -0.0246076384 0.0170082738 -0.0087275645 -0.0193025027 -0.0016755591 -0.0164286888 -0.0549175772 0.0067752375 0.0031531832 0.0366226451 -0.0148211024 0.0364295621 -0.0353544694 0.0673976628 0.0147470393 0.0122475893 0.0017187857 0.0168688899 -0.0642698690 0.0135251951 0.0127908906 -0.1310389336 -0.0329566838 -0.0139196964 -0.0074347129 -0.0081462640 0.0202054650 -0.0258031259 -0.0240203176 0.0027705579 0.0305123813 -0.0126390555 -0.0258013272 0.0300344799 0.0046249594 -0.0108531543 0.0077907551 -0.0037872583 0.0206900050 0.0240054300 -0.0364097258 0.0118104216 0.0544556810 -0.0065486098 -0.0452563002 0.0429021486 0.0233939250 -0.0225983996 0.0027368475 0.0032458674 0.0362653261 0.0422110230 -0.0100011942 0.0340382994 -0.0683637121 0.0046200022 -0.0201064008 0.0469660069 0.0170497868 -0.0253512030 0.0459487154 -0.0159619656 0.0068005558 0.1055242495 -0.0114090397 0.0229989993 -0.0360956828 -0.0028246731 0.0051914458 -0.0197266329 0.0056607193 -0.0093336384 0.0066211992 -0.0018466448 0.0011715087 -0.0003572140 -0.0040280867 -0.0012435610 -0.0002973672 -0.0014351788 -0.0015632494 -0.0012687070 -0.0000834048 0.0006553092 0.0005236089 0.0084922559 -0.0166790936 0.0037932029 0.0062846905 -0.0104982022 -0.0118584504 -0.0108331737 -0.0044236882 0.0010320803 -0.0005861335 -0.0089317762 -0.0014580274 -0.0091196801 0.0022191140 -0.0001050674 0.0211682689 0.0143508847 0.0055355210 0.0054021491 -0.0309860163 -0.0142692555 -0.0237571758 0.0022777792 0.0020378899 0.0003506008 0.0015382867 0.0022186436 0.0003819010 -0.0003790366 0.0013425751 -0.0006028557 -0.0007943358 -0.0002496910 0.0087490561 -0.0187466247 -0.0217204794 0.0052887041 -0.0036897889 -0.0150668144 0.0042193085 0.0000069431 -0.0101234487 -0.0055745520 -0.0450539010 -0.0543392411 -0.0240124611 -0.0136826149 -0.0589193868 -0.0105128290 0.0330883515 -0.0137364669 -0.0060874533 -0.0192861984 0.0463749701 0.0289884932 -0.0305418618 0.0109337431 0.0328789931 -0.0129234019 -0.0860487561 -0.0637498092 0.0055903036 -0.0951658450 -0.0225789660 0.0929123937 -0.0285992756 -0.0097838342 0.0019520138 0.0280249939 0.0735353363 -0.0417624118 0.0400604790 0.0772177897 -0.0063190990 -0.1327895487 -0.0477549168 -0.0302093202 0.0761214468 -0.0255886179 -0.0268393872 -0.0201536168 -0.0054492353 0.0291762328 -0.0468557120 0.0411706632 0.0433199835 0.0135123627 0.0297528611 0.0000041488 0.1161923123 -0.1006190253 -0.0878885207 0.1016656403 -0.0453053788 -0.0756775485 -0.0577556274 -0.0124307087 -0.0023102109 -0.0335456792 0.1112551581 0.0748694920 -0.0056371653 0.0833037758 -0.0092208617 0.1724413706 -0.0543537466 0.0247577598 0.0001829701 0.0289345021 -0.0009323701 -0.0061622734 -0.0607768801 -0.0457671752 -0.0114021431 0.0219692333 -0.0008453700 0.0136636558 0.0233859243 0.0792939552 -0.0418554352 -0.0056833783 0.0709236804 -0.0486954851 0.0531294758 -0.0129295160 -0.1232025959 0.0491092241 -0.0109546637 0.0555884583 0.1043184409 -0.0540948232 -0.2222985983 0.0822629541 -0.0298471172 0.1286673730 -0.0605289201 -0.0024713834 -0.1201255447 -0.0018405355 -0.0051359371 0.0639160458 -0.1418991917 -0.0259918989 -0.1904314934 -0.0163574569 -0.0175980469 0.1549774192 -0.0325821430 -0.0575428579 0.0323494101 -0.0002983427 -0.0534450479 0.0522212171 -0.1250058233 0.0024733775 0.0413936344 0.0339491850 -0.0173266267 -0.0481888440 -0.2293134707 0.0246967041 0.0483857428 0.0836109440 -0.0194791220 -0.1159442951 -0.0572486063 0.0251147306 0.1116829884 0.0621483980 -0.0024772390 -0.0098978424 -0.1080308811 0.0785033783 0.1948584033 0.1296722270 0.0143949763 -0.0415154685 0.0105744913 0.0100877606 0.0176114441 -0.0169985852 -0.0071333582 0.0325836628 0.0081952796 -0.0054605245 0.0533278368 0.0656739753 0.0304989942 0.0230099253 0.0057144834 0.0129533349 0.0334933010 -0.0475630290 0.0198522857 0.0739545213 0.0370950173 -0.0004884828 0.0521404118 0.0365134354 0.0055317327 0.0359674942 -0.0015992534 0.0044761786 -0.0006691043 0.0057685186 -0.0000718674 0.0015943678 0.0010766425 0.0004490837 0.0022650373 -0.0009440386 0.0070578699 0.0053953376 0.0021197015 0.0058315488 0.0013443368 -0.0213961975 0.0089630701 0.0279566024 -0.0241271764 0.0186604903 0.0160060757 -0.0092478461 0.0050569456 0.0049995666 -0.0152767869 0.0024871530 0.0105855834 0.0111407002 0.0010419315 0.0060488219 -0.0085214595 -0.0284380875 0.0156217719 0.0135311748 -0.0119199493 0.0075990334 0.0134507812 -0.0081501517 -0.0012075438 0.0109192957 0.0027729726 0.0023590678 0.0136158671 0.0014820132 0.0027831943 0.1561051007 -0.0648939931 0.1241038344 0.0298652380 -0.0147969301 0.0550005259 0.0100410163 -0.0046362634 0.0236908251 0.0028819958 -0.0142636657 0.0078080548 -0.0111630817 0.0086879805 -0.0151266433 -0.0041594053 -0.0034147031 -0.0003554905 -0.0232862376 -0.0018105234 -0.0173351419 -0.0158311611 -0.0014994962 -0.0098269904 -0.0159165943 0.0129637468 -0.0220220442 0.0057537870 -0.0079862598 0.0013771493 -0.0236032550 -0.0051903164 -0.0194037515 0.0630613426 -0.0121939954 0.0359233312 -0.0375863599 0.0257003774 -0.0959673156 -0.0433683448 0.0363400940 -0.1666495697 -0.0233120612 0.0001854123 -0.0244938582 -0.0158119649 0.0087084297 -0.0426803023 -0.0034804066 -0.0035146882 0.0309886659 0.0072581410 -0.0134965080 0.0342270685 0.0091053308 -0.0072982899 0.0160485635 0.0044533609 0.0026733232 0.0276198644 0.0010047683 -0.0038996435 0.0552829139 0.0149150085 -0.0271221456 0.0511866610 0.0198541432 -0.0125563157 0.0240425743 0.0151127418 0.0078079812 0.0535887946 -0.0349339822 0.0201218473 -0.1031980009 -0.0390244168 0.0096183179 0.0128561966 -0.0431803238 0.0227701426 0.0199943727 0.0011644280 -0.0057166290 -0.0169283105 -0.0207715739 0.0163028654 -0.0370362463 -0.0025678810 -0.0136137195 -0.0434826052 0.0227637581 -0.0495234022 -0.0202999300 0.0002733132 0.0077449636 0.0049275319 -0.0144230661 -0.0137834923 -0.0212976171 -0.0110313382 -0.0086994041 -0.0097986380 0.0017407815 0.0079364758 0.0075025384 0.0077856393 -0.0591972703 -0.0207751942 0.0252699871 -0.0589910686 -0.0515657165 -0.0583088633 -0.0286012110 -0.0173403728 0.0131197512 -0.0581781002 -0.0497593176 -0.0207820975 0.0051620661 -0.0097880678 0.0120625206 0.0062913590 -0.0183896960 -0.0052934967 -0.0402133069 -0.0377566946 -0.0355297867 -0.0165869895 0.0047035466 0.0068402897 0.0139973916 0.0125966454 0.0060974188 0.0000829537 0.0023499404 0.0050668579 0.0077989858 0.0079903152 0.0335422676 -0.0730406489 -0.0675870506 0.0307190215 -0.0306375618 -0.0413585605 0.0329041017 -0.0499344767 -0.0583833062 -0.0021505124 0.0021831922 -0.0021452189 -0.0039121129 -0.0033501862 0.0013808121 -0.0012932125 0.0019068993 -0.0018218042 0.0009292323 0.0008944505 -0.0003986954 -0.0018089257 -0.0024197789 0.0034760693 -0.0004425689 0.0021801212 -0.0017094394 -0.0052735633 -0.0080288380 0.0060973334 -0.0025793816 0.0059614093 -0.0023619140 0.0023706663 -0.0001116032 -0.0007253340 -0.0041514739 -0.0067121767 0.0067836802 0.0013565647 0.0023801000 -0.0036312526 0.0110758969 -0.0092562008 -0.0092769940 -0.0018069698 0.0100264699 0.0008811925 -0.0015150997 -0.0004056245 0.0061520142 -0.0062681469 -0.0121111162 -0.0022038428 -0.0083545306 0.0021869435 -0.0211755033 0.0248344729 -0.0094664710 -0.0104358406 -0.0057380907 0.0277255270 0.0010924832 0.0026104085 0.0013173260 0.0069121409 -0.0145407946 -0.0255191511 0.0035118755 -0.0198650507 0.0098536899 -0.0314489619 0.0026422622 -0.0005732424 -0.0001332148 0.0030891267 -0.0015914263 -0.0003577726 0.0140802950 0.0082599852 0.0027343961 -0.0006492152 -0.0015871351 0.0010368510 -0.0002901411 -0.0030672689 0.0018986280 0.0022647837 -0.0028143358 0.0031212902 -0.0023022015 -0.0025423426 -0.0023566248 0.0001643397 0.0019954900 0.0011496641 -0.0053796929 -0.0037787487 -0.0056805984 -0.0008379441 0.0049065100 0.0019303120 0.0033677268 -0.0029428961 -0.0022808343 0.0030063029 0.0015438842 0.0005903918 0.0048608211 -0.0041635902 -0.0050393639 0.0046488876 0.0039504290 0.0004560615 -0.0036390586 0.0147878293 -0.0006808288 -0.0032320305 0.0085086579 -0.0131928886 0.0249718563 -0.0004400807 -0.0143822784 -0.0070369529 0.0036949998 0.0024035843 0.0514736906 -0.0096018457 -0.0230818786 -0.0097347192 -0.0004502584 0.0129740640 0.0107835165 -0.0076789769 -0.0285174726 -0.0215741337 0.0039505499 -0.0020182017 0.0269568064 -0.0201647971 -0.0464335401 -0.0391292547 0.0033808581 0.0070494199 -0.0381061570 0.0602773566 0.0572705543 -0.1889939018 0.0675448230 0.0596114161 0.0133168968 0.1251427651 0.1784737558 0.0278154343 0.0478440158 0.0370824222 0.0530979404 0.1211557818 0.1005466694 -0.1922184236 -0.1888113229 0.1535676283 0.1856851847 0.2811981358 0.4633456032 0.2261159122 0.3450998393 -0.2389187715 0.0063136669 -0.0077780412 -0.0199636109 0.0157572322 -0.0131233165 -0.0148848224 0.0047579484 -0.0143279811 -0.0205395652 -0.0142009746 -0.0449197357 -0.0588505821 -0.0128796252 -0.0106260245 -0.0298257017 0.0717531984 -0.0460543192 -0.0576068451 0.0795156428 -0.0614231478 -0.0584982944 0.0110599617 -0.0021059468 0.0002383135 0.0445244964 -0.0336393226 -0.0279706435 -0.0428576780 0.0307309836 0.0332202494 0.0290404438 0.0922940358 0.0034946034 -0.0632542338 0.0910570346 -0.0160367886 -0.0199159406 0.0383106241 0.0321280887 -0.0298302818 -0.0295969010 -0.0277511733 0.0217660367 -0.0362664251 0.0002433040 -0.2179645452 0.0735060778 -0.1473730142 -0.0247888325 0.0314507923 -0.0618789503 -0.0097735971 0.0131387961 -0.0236131519 -0.0087354547 0.0113147584 0.0040963426 -0.0012143816 0.0015185542 0.0192098577 0.0074167373 -0.0010930312 0.0035408761 0.0187950952 -0.0053231699 0.0140793670 0.0098985664 0.0082068132 0.0239575556 -0.0019349503 0.0080021680 0.0204823730 0.0044365503 0.0006401128 -0.0004768486 0.0183940865 -0.0063627318 0.0133235771 -0.0966022434 0.0038323547 -0.0380337759 0.0302807579 -0.0335682451 0.1206722583 0.0314262040 -0.0430136265 0.2257845149 0.0406677430 0.0052416401 0.0357682594 0.0186263372 -0.0161456123 0.0547586214 0.0127779791 0.0046649096 -0.0456604361 0.0016965464 0.0246669768 -0.0393404167 -0.0154872695 0.0141381225 -0.0275826220 -0.0014803187 -0.0107652885 -0.0319785162 0.0075833121 0.0033757433 -0.0940800444 -0.0068799433 0.0459584359 -0.0579228460 -0.0399200089 0.0261085580 -0.0449760908 -0.0141701668 -0.0234831720 -0.0635036384 0.0382725243 -0.0333148664 0.1325279120 0.0520022396 -0.0069896484 -0.0347544877 0.0587727948 -0.0428206801 -0.0341008817 -0.0003949533 -0.0073042593 0.0385983509 0.0072921996 -0.0533513938 0.0598749448 0.0004616734 -0.0338626444 0.0102287062 0.0192978583 -0.0538171810 -0.0585962837 -0.0038100975 0.0064047028 0.0046892239 -0.0107090124 -0.0058037506 -0.0143820196 0.0086622296 -0.0163421259 -0.0045634932 0.0037169421 0.0069046571 0.0065463446 -0.0135399416 -0.0076570205 -0.0314395216 -0.0032145701 -0.0287516853 -0.0121743903 -0.0486843277 -0.0119410075 -0.0164172783 0.0104104872 -0.0360082458 -0.0410801603 -0.0048956767 0.0002222609 -0.0068602251 -0.0035448171 -0.0269197621 -0.0323081043 0.0040521677 0.0005244373 0.0016604408 0.0184637325 -0.0312527221 0.0049296266 0.0170172997 0.0218400464 0.0164490856 0.0150218413 -0.0120141889 -0.0165832978 0.0182174835 0.0162152711 0.0137182487 -0.0060956535 -0.0152890935 0.0037306600 0.0018433245 -0.0307584458 0.0002412752 0.0046726960 -0.0493348704 -0.0184781619 0.0092928122 0.0054860769 0.0089674956 0.0095388504 0.0036569391 0.0111641411 0.0046352525 -0.0081620748 0.0069582734 0.0010820082 0.0093328927 -0.0111937125 -0.0003197818 0.0070482191 -0.0061987488 -0.0031705385 -0.0056874626 0.0185637975 0.0122535634 -0.0012000881 0.0168059834 0.0071458116 -0.0296194835 0.0142402670 -0.0043428490 0.0033983802 -0.0054260744 -0.0031499511 0.0115842383 -0.0116583694 -0.0160606066 -0.0117512956 0.0339617838 -0.0210038059 0.0038078427 0.0268823050 -0.0113268329 -0.0017675654 -0.0028253999 0.0057100466 -0.0103764484 -0.0057293987 0.0084526992 0.0162090385 0.0078246375 0.0000153557 0.0103554067 0.0382815435 -0.0459047075 0.0030034480 0.0294163135 -0.0270349868 -0.0013636789 -0.0215563643 0.0007070812 -0.0111514866 -0.0109846806 0.0236867269 0.0393680109 -0.0020126488 0.0078551517 0.0243443636 0.0506814774 0.0002835774 -0.0038732763 0.0005577087 -0.0136589672 0.0022723675 0.0028013674 -0.0240434529 -0.0138752442 -0.0110813553 0.0127600171 0.0035327025 0.0025162188 -0.0045837022 -0.0133693521 0.0099091992 -0.0101870193 -0.0200381119 -0.0131978926 -0.0072323687 0.0127449439 0.0480660106 -0.0166643486 -0.0076622672 -0.0323921366 -0.0126695230 0.0317788052 0.0952486510 -0.0252234984 -0.0155344707 -0.0676331205 0.0079264588 0.0113449789 0.0472450456 -0.0078849379 -0.0000712878 -0.0122239857 0.0329883517 0.0273317239 0.0904319914 -0.0056660030 0.0025586682 -0.0203127271 0.0315974266 -0.0245063975 -0.0195390795 0.0006094287 -0.0005967086 0.0153591684 -0.0575187075 0.0169794110 0.0364211217 0.0074648383 -0.0118153182 -0.0011181636 -0.1260608842 0.0493528428 0.0760800686 0.0019268781 -0.0054620906 -0.0033749692 -0.0467148933 0.0236116865 0.0490710512 0.0507446035 -0.0264075199 -0.0148386644 -0.1033167890 0.0533183271 0.0843313810 0.0993953638 -0.0436647774 -0.0444717926 -0.0745628577 0.0326684351 0.0293102875 -0.1790948077 0.0896399598 -0.0097437493 -0.0060830083 0.1546039324 0.0754440942 -0.1432444163 -0.0356894296 -0.0089713865 0.0520106132 0.1041925462 0.0275686370 -0.0224126883 -0.1629195296 -0.0241730506 0.0516288777 0.3063539514 0.2952685027 0.1674568740 0.3185953198 -0.2848508642 0.0067668082 -0.0011192016 -0.0401961618 0.0428437508 -0.0149087212 -0.0098341052 0.0123410063 -0.0191850921 -0.0267381064 -0.0293163044 -0.0638687938 -0.1024851319 -0.0210638249 -0.0036919990 -0.0521984235 0.0779236656 -0.0577205348 -0.0198794237 0.0850453874 -0.0604312961 -0.0631562739 0.0018589576 -0.0044840510 0.0132392814 0.0420868206 -0.0518262248 -0.0154747231 -0.0381547402 0.0400662758 0.0700569280 0.0388089744 0.0949157118 0.0602116482 -0.0822753047 0.1345432739 0.0026214264 0.0062300489 0.0474987229 0.0522158585 -0.0240458076 -0.0568540771 -0.0535731065 0.0892208042 -0.0650008950 0.0049889109 0.2552312045 -0.1195275833 0.2238555891 0.0517174213 -0.0047386269 0.0832479411 0.0125928081 0.0048944771 0.0359061326 -0.0119178253 -0.0262493435 0.0099037553 -0.0133831217 0.0201247480 0.0037699709 -0.0143856992 -0.0017940353 -0.0165896094 -0.0323285602 -0.0184543872 -0.0057943360 -0.0462210106 0.0063840999 -0.0230911894 0.0001158124 0.0237214673 0.0321294448 0.0025897872 -0.0087454129 -0.0316988528 -0.0192367395 -0.0368068373 0.0091590751 0.0984545906 -0.0307202741 0.0699036156 -0.0698462219 0.0405523673 -0.1514527533 -0.0921400945 0.0687468043 -0.2761959929 -0.0365186054 0.0072765378 -0.0535596889 -0.0253324034 0.0060779111 -0.0725056245 0.0044851478 -0.0103245221 0.0508558786 0.0143799253 -0.0158603767 0.0400192685 0.0226800972 -0.0135901964 0.0395649606 0.0069859750 -0.0037697051 0.0340806229 0.0275264661 -0.0183492202 0.1073572720 0.0221283908 -0.0331356398 0.0570118444 0.0418799465 -0.0203311236 0.0733131694 0.0222541908 0.0018834269 0.0710712545 -0.0600761814 0.0226397145 -0.1703381261 -0.0669383163 0.0238475641 0.0093271747 -0.0761194631 0.0193781017 0.0142295913 -0.0003405413 -0.0114604283 0.0263352578 -0.0142282337 0.0641359418 -0.0758989730 0.0009028396 0.0318939279 -0.0283010524 -0.0119097100 0.0447788255 0.0577981348 0.0042107892 -0.0034673527 -0.0041309973 0.0092953282 0.0029973603 0.0138121357 -0.0001877643 0.0064062071 -0.0010682142 -0.0033432312 -0.0061012679 -0.0049947592 0.0179171633 -0.0154937647 0.0222866036 0.0153875091 0.0052351273 -0.0087061124 0.0348566421 -0.0022273815 0.0211804362 -0.0062028423 0.0198128069 0.0404378989 -0.0043743895 0.0030816150 0.0072920686 0.0262397535 0.0264560994 0.0207689063 0.0062365968 -0.0236727806 -0.0143205341 -0.0284062510 0.0232441950 -0.0069272741 -0.0182697735 -0.0219869088 -0.0123055255 -0.0157180421 0.0142330825 0.0219897650 -0.0191670144 -0.0209192508 -0.0149472228 0.0214804524 -0.0134190058 -0.0304714383 0.0127528614 0.0187135567 -0.0164514759 0.0108827374 0.0291146959 -0.0054672038 0.0107133807 0.0175018706 0.0080567605 0.0047100198 -0.0030185801 0.0237146899 0.0041843603 -0.0074083212 0.0067411167 0.0044642785 0.0197062675 -0.0205513870 -0.0066807127 0.0036107941 0.0012801277 -0.0067077160 -0.0036592633 0.0277519268 0.0049279209 -0.0262719508 0.0481082392 0.0043033109 -0.0310720089 0.0172815951 -0.0016087359 0.0053733327 -0.0123545621 -0.0198016913 -0.0045613765 0.0043888243 -0.0245350534 -0.0149663276 0.0501371748 -0.0174782454 0.0059142287 0.0180425163 -0.0117391575 0.0053390494 -0.0018220615 0.0097974256 -0.0170264432 -0.0002424757 0.0075074454 0.0068303287 0.0059852571 -0.0061620181 0.0176749311 0.0216173235 -0.0343323675 0.0081491197 0.0186546923 -0.0234553443 0.0124973576 -0.0142368016 0.0054641537 -0.0094702491 -0.0070492751 0.0181449146 0.0200397920 0.0001898801 -0.0068900092 0.0410461580 0.0273091989 0.0085420193 -0.0082544704 0.0002789825 -0.0151466387 -0.0013323436 0.0036284830 -0.0189163591 -0.0087540096 -0.0089425402 0.0128297273 0.0093098907 0.0004754170 -0.0066565196 -0.0270307523 0.0202367271 -0.0144532661 -0.0425123457 -0.0277135049 -0.0125242996 0.0194021236 0.0835233008 -0.0262142056 -0.0124310463 -0.0604357573 -0.0253147142 0.0523892080 0.1649927992 -0.0437609663 -0.0237143400 -0.1265586321 0.0218894727 0.0166908237 0.0811677483 -0.0052530984 0.0037685545 -0.0163865819 0.0698733422 0.0452966622 0.1594133002 0.0022272781 0.0144763109 -0.0221988511 0.0435801960 -0.0102830899 -0.0368604452 -0.0079960263 0.0130286146 -0.0079570202 -0.0503624215 0.0295213530 0.0245276289 -0.0060351088 -0.0150136230 -0.0071405807 -0.1143145439 0.0651737797 0.0725274856 -0.0181745665 -0.0165245300 0.0127009905 -0.0655263445 0.0216808682 0.0170092691 0.0318234922 -0.0379185850 -0.0395208264 -0.1313127427 0.0483515675 0.0422883174 0.0753598237 -0.0661394502 -0.0692431678 0.0650676631 -0.0098143724 -0.0156591682 0.1267602940 -0.0664512101 0.0254564980 0.0099903564 -0.1164506275 -0.0258079623 0.1557575251 0.0566972893 0.0175734962 -0.0380852677 -0.0661876258 0.0049271948 -0.0508065935 0.0985390743 0.0786607736 0.0141631736 -0.2232439475 -0.1432486812 -0.0976633618 -0.2088775836 0.2088412826 -0.0000476329 -0.0017334566 -0.0013840764 -0.0011502635 0.0017904480 0.0050722217 0.0000690928 0.0004966970 0.0019033473 -0.0003526780 -0.0008036434 -0.0022068792 -0.0013118048 -0.0009545102 0.0002676650 0.0009514208 -0.0002516511 0.0024217672 0.0018253183 -0.0002152336 -0.0004856617 -0.0000368339 -0.0009723479 0.0002085316 -0.0003463120 -0.0005595512 0.0009474414 0.0014275911 -0.0009260382 0.0008260404 0.0015647724 0.0009575277 0.0037121097 -0.0013709368 0.0005257619 0.0039262385 0.0010806119 0.0002081370 0.0004981646 0.0001876621 -0.0010617707 -0.0008028676 0.0035655870 -0.0049450737 -0.0011141133 -0.0215718408 0.0159065791 -0.0379729740 0.0119697756 -0.0048893738 0.0160886270 0.0055892514 -0.0022295165 0.0068942917 0.0018736762 -0.0044735372 0.0064811950 -0.0050924262 0.0035964183 -0.0076440858 0.0008214660 -0.0009163375 -0.0011274172 -0.0072614914 0.0003024342 -0.0082101312 -0.0033534345 -0.0019637032 0.0002433780 -0.0094007867 0.0084113725 -0.0136907780 0.0020100341 -0.0013859722 -0.0030569639 -0.0141609829 0.0019580798 -0.0193970012 0.0100135109 -0.0010036814 0.0065240148 0.0055016167 0.0047160952 0.0017030741 -0.0008049745 0.0094619553 -0.0025559180 -0.0013388471 0.0044041224 -0.0080794321 0.0028969544 0.0002835457 0.0040343315 -0.0769642267 0.0261887660 -0.1917177904 0.0782206489 -0.0213738590 0.1804551359 -0.0782105777 0.0303713195 -0.1842350528 0.0784159631 -0.0261228815 0.1759580057 -0.1695910910 0.0575107837 -0.4150928892 0.1965048944 -0.0759021295 0.4376894837 -0.1558381631 0.0505076892 -0.3663838954 0.1718545771 -0.0580337355 0.4012889237 0.0071700744 -0.0061253708 0.0287607075 -0.0074723603 -0.0001799567 0.0033654369 -0.0082077115 0.0027052592 0.0018278024 -0.0003081864 0.0003566543 -0.0003018929 0.0009180825 -0.0017297421 0.0022464758 -0.0019102540 0.0008648504 0.0020552660 0.0013644708 -0.0013650645 -0.0027151978 0.0009991028 0.0006784708 -0.0001968493 -0.0004383603 0.0009573048 0.0009658171 -0.0127761797 -0.0030398306 -0.0039917807 0.0002683773 -0.0001450433 0.0001783266 0.0013388713 0.0029310875 0.0073458121 -0.0042641927 0.0046486145 0.0046430421 -0.0016812208 -0.0003299148 0.0014710228 0.0003364002 -0.0023720773 0.0026572871 -0.0047650895 0.0032078240 0.0006470239 -0.0488160266 -0.0295695689 -0.0140390342 -0.0258754959 0.0474976998 0.0061220169 0.0273214883 -0.0213095397 0.0003650829 -0.0005729707 -0.0002939984 0.0029842374 -0.0001386975 0.0002569372 0.0027003335 0.0003791784 -0.0044347577 -0.0016706296 -0.0038730309 0.0038155975 0.0037496567 -0.0060707265 0.0020098653 0.0003253047 -0.0081094729 0.0096994137 0.0082502497 0.0004726679 -0.0004264747 -0.0024209105 0.0129127183 0.0239411021 -0.0239405320 -0.0083030579 -0.0233576501 0.0203109755 0.0005098803 0.0021005776 -0.0008112858 0.0093231788 0.0252413687 -0.0212997721 -0.0121917473 -0.0247011687 0.0197624022 0.0247895405 0.0483542612 -0.0473902329 -0.0213125876 -0.0562240428 0.0498647608 0.0001068985 0.0025247915 0.0026557522 0.0222918095 0.0553923567 -0.0462412843 -0.0245830558 -0.0523254645 0.0432555291 0.0023074135 -0.0045191511 0.0010998044 -0.0020368609 0.0045723964 -0.0013913451 -0.0002519876 0.0007822206 -0.0002844662 0.0023954736 -0.0048647972 0.0012144484 -0.0022025582 0.0042450066 -0.0015304077 0.0051788247 -0.0101019236 0.0028784355 -0.0040701413 0.0090205433 -0.0026423266 -0.0000487643 0.0004717100 0.0000944878 0.0056566013 -0.0114077953 0.0031215631 -0.0046270828 0.0088166481 -0.0028153839 -0.0040213662 0.0000833762 0.0028146194 0.0028629606 0.0000183238 0.0010843531 0.0002245162 0.0002466431 0.0001891771 -0.0000713964 -0.0001905181 0.0001115104 0.0008413935 0.0014206037 0.0005120515 -0.0005696197 0.0004174039 -0.0020347672 0.0015241276 0.0007507116 0.0003479960 0.0008023911 -0.0008531390 -0.0017036532 0.0023036804 0.0008173977 0.0005499765 0.0008377818 -0.0024051088 -0.0036293402 -0.0003933916 0.0010162496 0.0003512444 0.0001364963 0.0002357249 0.0011105049 -0.0006037398 0.0014597075 0.0014351070 -0.0001250016 0.0000460593 0.0032202194 0.0005815940 0.0004454133 -0.0007582366 -0.0008267352 0.0003188231 -0.0012631161 -0.0009024052 0.0011479635 -0.0005011618 -0.0006581464 -0.0002420899 -0.0011424185 -0.0018700571 0.0015539099 -0.0000283056 -0.0005266345 -0.0009927886 -0.0001234302 -0.0021602450 0.0001043918 -0.0013739151 -0.0009025246 -0.0007780906 -0.0023026006 -0.0032801690 0.0005086291 -0.0010646120 -0.0005483919 -0.0014495704 -0.0026595254 0.0076184600 -0.0075641144 0.0015708089 0.0052225943 -0.0001008348 -0.0041533339 0.0070959709 -0.0099044777 0.0120207377 0.0184928508 -0.0149444358 -0.0056853434 -0.0022436638 -0.0056623488 -0.0038956095 0.0049680335 0.0005092845 -0.0065751546 -0.0048072614 -0.0115598057 -0.0145207773 -0.0111832021 -0.0112113260 0.0054125109 -0.0005906256 0.0170730866 0.0106137821 0.0156266097 -0.0176398888 -0.0423913954 0.0022956934 -0.0067991795 -0.0162801861 -0.0049908459 -0.0007095852 -0.0011395272 0.0010345733 0.0134260136 0.0023350692 0.0026115913 -0.0113813627 -0.0083615400 -0.0043810961 -0.0035335001 -0.0059835764 -0.0002969776 0.0069062758 0.0064661224 0.0089997014 -0.0108108121 -0.0030102355 -0.0081120763 0.0164930413 0.0190331549 -0.0116926715 -0.0125665148 -0.0033086900 -0.0085060177 0.0207884011 -0.0193127343 0.0011636525 0.0044042873 0.0014413662 0.0026818280 -0.0058914293 -0.0052572071 -0.0049775224 0.0199520081 0.0060859981 -0.0081879666 0.0121351160 -0.0216153833 -0.0015198397 -0.0039458570 -0.0011729906 0.0018171613 -0.0021350654 -0.0006744368 0.0023179350 0.0017091537 -0.0003424304 0.0020351070 -0.0017738379 -0.0045506104 0.0023590640 0.0013534427 0.0018634305 -0.0001232020 0.0038551556 -0.0028240854 0.0031243205 -0.0037816372 0.0001129574 -0.0004991432 -0.0004495295 -0.0089277304 0.0012919477 0.0017107523 0.0042252535 -0.0032373660 0.0054185839 -0.0076173594 0.0037263473 0.0058090181 -0.0029911774 0.0089052805 0.0008158795 0.0050569287 0.0128477123 -0.0026228808 0.0066637879 -0.0016112248 -0.0016563714 0.0020044058 0.0017364443 0.0014582813 0.0032081980 -0.0170134640 0.0049636724 -0.0332893693 0.0105708104 -0.0059596597 0.0308172505 -0.0143751339 0.0044315832 -0.0337358494 0.0120826013 -0.0020849138 0.0299773918 -0.0362046564 0.0120435203 -0.0730943764 0.0299763306 -0.0154235012 0.0728260401 -0.0261560742 0.0066125978 -0.0682545787 0.0275868204 -0.0055628625 0.0675502109 0.0050711590 0.0007525027 0.0101121092 -0.0036215070 -0.0028816847 0.0040193199 -0.0066014605 0.0027619174 0.0022113444 0.0035204248 -0.0069123953 0.0017018812 0.0016117677 -0.0017486542 0.0016655023 0.0002737736 -0.0004108450 0.0011678924 0.0043851639 -0.0060170793 -0.0053071654 -0.0024917412 -0.0009332338 -0.0003635699 -0.0014260083 0.0007924455 0.0003929954 -0.0030418614 0.0003697866 0.0017838740 -0.0000527072 -0.0008129474 -0.0010509044 0.0025056747 0.0055583483 0.0021754702 -0.0059220922 0.0041228245 0.0053141330 -0.0031492270 -0.0007705913 0.0011990421 -0.0008248104 0.0001218791 -0.0007690179 -0.0016440990 0.0022296313 0.0013939961 -0.0057424609 -0.0020672222 -0.0010861400 -0.0039328080 0.0046082605 0.0075974961 0.0038133736 0.0010661955 -0.0007148127 0.0014191601 0.0008679723 -0.0001197689 0.0015188655 -0.0035140117 -0.0036289652 0.0012999877 0.0010104322 0.0000558676 -0.0089086328 0.0070322964 0.0081943347 -0.0079024972 -0.0034394055 0.0012957992 -0.0095600812 0.0059851479 0.0087458827 -0.0076983459 0.0059513327 0.0155062904 -0.0799248351 -0.1445563977 0.1417712509 0.0456625977 0.1370577136 -0.1290298384 -0.0018185437 -0.0074881279 -0.0076480689 -0.0630935412 -0.1489892538 0.1214451121 0.0617679829 0.1432242229 -0.1110478986 -0.1483408216 -0.2971204994 0.2897924662 0.1159285109 0.3252098429 -0.2937400782 0.0063854322 -0.0100725773 -0.0110090894 -0.1495032528 -0.3313630372 0.2690692969 0.1292417633 0.3005323331 -0.2418517912 -0.0165355960 0.0328460350 -0.0085806756 0.0106367499 -0.0246006642 0.0087948523 0.0049633321 -0.0126759423 0.0050276350 -0.0165121992 0.0304394406 -0.0075407707 0.0089575975 -0.0198843019 0.0060767721 -0.0356746555 0.0735615670 -0.0217019923 0.0207712217 -0.0457223986 0.0152455883 0.0028935512 -0.0055260101 0.0002834090 -0.0388548314 0.0733846330 -0.0198281659 0.0186129482 -0.0395334586 0.0108320129 0.0339477816 -0.0033463310 -0.0086698499 -0.0112905599 -0.0045749068 0.0026535210 -0.0025363999 -0.0004619889 -0.0029440596 0.0027479555 0.0049414204 -0.0015748283 -0.0031311706 -0.0141479160 -0.0011528135 0.0032683665 -0.0102414729 0.0076748353 -0.0055996714 -0.0032363891 0.0107908819 -0.0009833825 0.0040625727 0.0000640835 -0.0125112160 0.0022901996 0.0240249936 -0.0044258035 0.0140189404 0.0027600585 0.0118219411 -0.0025452028 0.0087503148 0.0058665201 -0.0003804363 -0.0108301624 0.0228070669 -0.0005529140 0.0155925472 0.0080377772 0.0015616714 -0.0230051465 0.0035616221 0.0045321779 -0.0044852280 0.0022179145 0.0080785298 0.0003321245 0.0059084499 0.0007024085 0.0038012119 -0.0000309885 -0.0017188682 0.0081593884 0.0123172851 0.0023895765 0.0092365947 -0.0031882619 -0.0007056315 0.0111743411 0.0027564480 0.0016219719 -0.0008260275 0.0034208298 -0.0036866220 0.0055800358 0.0010128594 -0.0017436670 -0.0079423078 0.0038784602 -0.0081425524 0.0043172445 0.0012895380 -0.0007406058 0.0008176247 -0.0005286742 0.0006517215 -0.0001629986 0.0025144748 0.0016873788 0.0021578395 0.0011423970 -0.0021658491 -0.0002292564 0.0016546322 -0.0006221739 -0.0028308186 0.0055275686 -0.0014831770 -0.0058806819 -0.0019403505 0.0010911242 -0.0045801062 0.0000763425 -0.0003625402 -0.0029235160 -0.0028767856 -0.0143049855 -0.0071358390 -0.0269189900 0.0117772036 0.0070837780 -0.0122348782 0.0040741606 -0.0104746101 0.0098372359 -0.0157096370 -0.0270847641 0.0076586562 -0.0239466831 -0.0272932361 -0.0092761529 0.0159407123 0.0103915620 0.0145826716 -0.0059329739 -0.0024007962 0.0054986978 -0.0141486057 -0.0086945810 -0.0216708388 0.0212902669 0.0114840193 0.0240471390 -0.0349992399 -0.0348648793 0.0126770374 0.0223590847 -0.0014278625 0.0209831407 -0.0275279092 0.0091516045 -0.0027833935 0.0029453510 -0.0021351123 0.0003491043 0.0083419375 0.0045296570 -0.0046798806 -0.0024490796 -0.0036131154 -0.0182633030 0.0101801806 -0.0179013718 0.0000314995 -0.0010685914 -0.0017214961 -0.0007344138 -0.0003168014 -0.0039237280 0.0030984716 0.0008899059 0.0030402578 -0.0006256158 -0.0006556640 -0.0031645897 -0.0003108320 0.0021252918 -0.0017995794 0.0032178885 0.0012578588 0.0021454853 0.0033192105 -0.0014583604 0.0025797547 -0.0028954492 -0.0000041722 -0.0071576907 -0.0037564333 0.0037272978 -0.0031985801 0.0014306097 0.0024889908 -0.0003821253 -0.0061313672 0.0033875935 -0.0048449187 0.0040014112 -0.0014110473 0.0079472204 0.0068037233 -0.0044411453 0.0168810812 0.0016049424 -0.0005292002 0.0032986733 0.0017104987 -0.0007458223 0.0033892670 -0.0006549703 0.0001753581 -0.0025866243 -0.0003605533 0.0002035870 -0.0014545480 -0.0009507701 0.0002850119 -0.0027436308 -0.0002469150 0.0000093923 -0.0015124672 -0.0019105004 0.0006212732 -0.0057067481 -0.0004135132 0.0004109893 -0.0016317036 -0.0024712980 0.0009196928 -0.0046870907 -0.0008739484 0.0002427001 -0.0030414834 0.0037354189 -0.0014584684 0.0083368273 0.0029698795 -0.0016650104 0.0006136117 0.0020939955 -0.0010253093 -0.0046138047 -0.0110394024 0.0190367769 -0.0029599745 0.0006458404 -0.0019959522 0.0042694269 0.0007034887 -0.0002696112 0.0021714654 -0.0045823070 0.0070161897 0.0033167042 0.0022541543 0.0014832276 -0.0002332439 0.0027406450 0.0006358051 -0.0011656097 0.0004493202 0.0016123266 -0.0005481221 0.0000719362 0.0012980973 0.0011457403 -0.0027402701 -0.0030778128 -0.0023971876 0.0047615077 -0.0025843123 -0.0033374792 0.0129670368 0.0012029208 0.0000440088 -0.0017760954 0.0033088334 0.0095870670 -0.0014513630 -0.0032116191 -0.0059600264 -0.0019306796 -0.0003354109 -0.0016558966 -0.0000349909 0.0044716609 0.0010748598 0.0025291443 0.0001941965 -0.0000712035 -0.0012819692 -0.0001216481 0.0005096911 -0.0010706413 0.0031866952 0.0040838868 -0.0015072334 -0.0002102748 0.0001390383 0.0075344460 -0.0043172540 -0.0047570429 0.0064776705 0.0033068451 0.0001113721 0.0078732343 -0.0055310859 -0.0062381232 0.0047195918 -0.0004083000 0.0178931364 0.0025050618 -0.0127190179 0.0274783261 0.0191867694 0.0245047693 -0.0247897066 -0.0055184840 -0.0184304328 0.0077151964 -0.0104743840 -0.0244282008 0.0179999626 0.0194385178 0.0406100871 -0.0195790692 0.0033189513 -0.0255717007 0.0421962388 0.0431169706 0.0613566898 -0.0682949035 -0.0059711830 -0.0078982247 0.0001654201 -0.0268595355 -0.0460011555 0.0332124634 0.0318382956 0.0891094170 -0.0513851851 0.0927721177 -0.1809264089 0.0524261687 -0.0765926736 0.1752958460 -0.0549498388 -0.0118919484 0.0336937894 -0.0150260860 0.0934138606 -0.1866194901 0.0475725527 -0.0834677117 0.1596179102 -0.0475441621 0.1981170501 -0.4014032882 0.1233487784 -0.1580532823 0.3481072483 -0.1061210883 -0.0049090114 0.0145577450 -0.0022312847 0.2172543481 -0.4299217767 0.1175224581 -0.1730903218 0.3317822556 -0.0941638665 0.0049140827 0.0028901998 -0.0042306016 -0.0128410412 0.0065578158 -0.0001872061 0.0040826541 0.0047705071 0.0041982474 -0.0010788906 -0.0144581101 0.0069895364 -0.0066685360 0.0152673683 -0.0096628608 -0.0046807110 0.0117672668 -0.0144171877 0.0021545463 0.0128567493 0.0160388953 -0.0123140287 -0.0141853127 -0.0061563246 0.0216355101 0.0200658483 0.0355770883 -0.0091846308 -0.0274456214 -0.0139046388 -0.0143411351 0.0108099549 0.0213069394 -0.0163126955 -0.0108590891 0.0007412548 -0.0257897581 0.0190439356 0.0401133169 -0.0205288641 -0.0169416210 -0.0005648482 -0.0014466713 -0.0148817812 0.0059179438 0.0021744105 -0.0175358727 0.0080236119 -0.0153215853 -0.0053590900 0.0040336388 0.0069825614 0.0011823410 -0.0071325731 -0.0363572579 -0.0028430507 0.0016439239 0.0093881561 0.0057859797 -0.0182427564 -0.0020928600 0.0024415994 0.0194059195 0.0089320457 0.0058898410 0.0022885510 -0.0074822994 0.0137562089 0.0393465095 0.0120780946 0.0146020781 0.0027315835 0.0004431577 -0.0038043380 -0.0023242077 0.0073019932 -0.0013559361 -0.0046779048 -0.0017178085 -0.0068334003 -0.0069071212 -0.0033409631 -0.0061830725 -0.0033761905 -0.0051803530 -0.0072780180 0.0000160913 0.0043767237 0.0094198618 -0.0006422848 -0.0087227460 -0.0164610897 -0.0162641406 -0.0182603263 -0.0141084842 0.0126429002 0.0057183354 0.0857212088 0.0730897948 0.1037531008 -0.0915570270 -0.1432495080 0.0433138029 -0.0259112642 0.0168764800 -0.0376995137 0.0709596072 0.1293540982 -0.0295557024 0.1245016344 0.1644421756 0.0615433777 -0.1087489638 -0.0866629588 -0.0197631887 -0.0196357694 -0.0515694697 0.0032862706 0.0721912792 0.0540550444 0.1026739986 -0.0925839587 -0.0258411371 -0.0624642687 0.1741942904 0.1931912469 -0.1089590807 -0.1645224292 -0.0129649621 -0.0989216387 0.1235546212 -0.0721324561 -0.0092817925 -0.0005272112 -0.0088546887 0.0222891339 -0.0375283113 0.0063474233 0.0050036652 0.0381645831 -0.0009319994 -0.0082163493 0.0059211447 -0.0086530597 -0.0029221953 -0.0028450157 -0.0024493867 -0.0006113138 -0.0018272514 -0.0019723219 0.0027332977 0.0003742155 0.0010317497 0.0007912589 -0.0018918501 -0.0026062265 0.0000678640 0.0004893119 0.0000856180 0.0007738063 0.0020229947 -0.0014174478 0.0035995263 -0.0029632812 0.0018744923 -0.0017666234 -0.0013873244 -0.0075193967 -0.0006374562 0.0008143897 0.0025278511 -0.0018590826 0.0042630106 -0.0051056840 -0.0018496023 0.0023781232 -0.0031342755 0.0032591786 -0.0004376858 0.0037594156 0.0059244220 -0.0029864666 0.0087511807 0.0004055949 -0.0006169303 0.0018207431 0.0004775491 0.0001138365 0.0021167336 0.0005938925 -0.0005892459 0.0025797865 -0.0027502408 0.0005736340 -0.0037405508 0.0005753348 0.0000318417 0.0021679790 -0.0018433578 0.0006903084 -0.0039342843 0.0014427061 -0.0007843293 0.0056097695 -0.0040567192 0.0024602795 -0.0066124064 0.0042800764 -0.0019095246 0.0035136430 -0.0038711468 0.0013757402 -0.0087863974 0.0012413960 -0.0004209440 0.0048283663 -0.0011195599 -0.0001663679 0.0019392642 -0.0043387659 0.0097391970 -0.0097652855 0.0430934510 -0.0435752229 0.0534814245 0.0007167184 -0.0012780307 0.0026915546 0.0007368017 0.0001848312 0.0014997929 -0.0025154878 0.0048311563 0.0022512168 0.0010551384 -0.0001962230 0.0000901003 0.0015063381 -0.0006217892 0.0012081635 0.0051108237 -0.0011032291 0.0005857140 0.0000552327 0.0000139738 0.0000831867 -0.0009748078 -0.0006982668 -0.0009579550 0.0019383993 -0.0004765272 -0.0009442369 0.0029314429 -0.0021961925 0.0021183391 0.0004040137 0.0022569484 0.0013304414 0.0032872191 0.0003537270 0.0027954138 0.0048429852 -0.0012264208 -0.0040407518 0.0048733514 -0.0030709191 0.0010589782 0.0056184396 -0.0027289822 0.0017851580 -0.0014006138 -0.0018667231 -0.0019650402 -0.0012051773 0.0024121968 0.0011026665 -0.0007403518 0.0007728727 0.0002451092 0.0029583363 -0.0010300156 -0.0013365648 0.0026053489 0.0015598657 0.0004041702 0.0031742570 -0.0018970082 -0.0021049546 -0.0381525450 0.0106257472 -0.0748558537 -0.0750418805 -0.0376601065 -0.0374150565 -0.0639528265 -0.0128416160 0.0169875830 0.0178691361 0.0639421254 -0.0288026337 -0.0078808705 0.0045081486 0.0089015871 -0.0513557518 -0.0674364988 -0.0048711092 -0.1233010806 -0.0783149045 -0.0078492431 -0.1251028478 -0.0363666932 0.0957949319 0.0391446802 0.0231260937 -0.0014617282 0.0012678328 -0.0289268805 0.0445947488 -0.0515902519 -0.1670826131 0.0347806786 0.0177675177 -0.0069191775 0.0425169521 -0.0364467942 0.1069170131 -0.0166108870 0.0358564099 -0.0780076132 0.0228950008 0.0246111753 -0.0216998187 0.0320751051 -0.0612537826 0.1277304710 0.0102819009 -0.0003108743 -0.0116240000 0.0459023974 -0.1035455602 0.2497158659 -0.0579393630 0.0133129106 -0.0487737763 -0.0183931596 0.0502946243 -0.0192810490 0.0278553575 -0.1438463263 0.2887410216 -0.0303836594 0.0096630543 -0.0116560340 0.0137523850 0.0681917686 -0.0342605502 -0.0010428423 -0.0628179185 -0.0203018135 -0.0401031575 0.0260566820 0.0187412295 -0.0128435551 0.0256800793 -0.0636250091 0.0484918997 0.0269337888 -0.0356499079 0.0967446538 -0.0121881639 -0.0659413915 -0.0796329323 0.0565595652 0.0634206582 0.0479247457 -0.0964162307 -0.1066838578 -0.1878814662 0.0440549207 0.1286288631 0.0945729761 0.0612174339 -0.0513419645 -0.1002153538 0.0712764910 0.0373987349 -0.0128395934 0.1018060359 -0.0976799931 -0.2111098027 0.0837543709 0.0521576896 -0.0362355802 0.0311893032 0.0541523173 -0.0561856071 0.0046144841 0.0911252407 -0.0270983504 0.0250239991 0.0353546735 0.0138140309 -0.0261915314 -0.0265868645 0.0370668664 0.0715942608 0.0581487595 0.0752838283 -0.0450403948 -0.0397824441 0.0864272574 -0.0295303268 0.0116997600 -0.0438915058 -0.0000656386 -0.0556587405 -0.0082016081 -0.0725392243 -0.0144297593 -0.1119376909 0.0150233819 -0.1065671134 -0.0283638134 0.0006884022 -0.0026883626 -0.0016032067 0.0063735863 -0.0016688710 -0.0027374235 -0.0012014348 -0.0053227161 -0.0056173729 -0.0019643653 -0.0035146492 -0.0017216559 -0.0039045599 -0.0066441524 -0.0015749437 0.0054433784 0.0123377584 -0.0011161572 -0.0080129775 -0.0158700471 -0.0187686446 -0.0124543975 -0.0165136515 0.0138382797 -0.1021679698 0.0769179606 -0.0730768913 0.0772560159 0.0263130182 0.1109676062 -0.0304616494 0.0002057401 0.0304754576 0.0069453432 0.0476849252 -0.0340382399 -0.0141195065 0.0432783600 -0.0909853215 0.0421676777 0.0710239563 -0.0095583672 -0.0356067643 0.0767355620 0.0182237605 -0.0091708906 -0.0092844723 0.0467968029 0.0767443634 0.1061480466 0.0349518992 -0.0897041457 -0.0287432156 -0.0192930009 0.0626081693 0.0320270211 -0.0266440039 0.0466302408 -0.0419031559 0.0171309944 0.0186647888 -0.0307756485 0.0271901380 -0.0645267808 0.0307855858 -0.0351886400 -0.0134778556 -0.0157193129 0.0405983359 0.0024053453 -0.0092205807 0.0095784882 0.0064382127 0.0035818675 0.0061558743 -0.0000147922 0.0030067362 0.0013629971 -0.0042822354 -0.0013294985 -0.0005876678 -0.0028470391 0.0030416824 0.0055912292 -0.0018611620 -0.0007006844 -0.0031454943 0.0024436182 -0.0063202974 0.0067636686 -0.0064850125 0.0067440407 -0.0032245836 0.0016650713 0.0029226569 0.0143005132 -0.0022793462 -0.0002923982 -0.0087822817 0.0096761554 -0.0121038958 0.0171288448 -0.0045004340 -0.0055525073 0.0032500207 -0.0049612874 -0.0014499739 0.0004629656 -0.0098021698 0.0024300092 -0.0000568974 0.0018895886 0.0015002479 -0.0000348735 -0.0018164325 -0.0018164713 0.0007091621 0.0022080541 -0.0011775692 -0.0014953391 0.0009738443 0.0024076996 0.0001729841 -0.0012019660 0.0015066636 0.0004517582 0.0000709293 -0.0032002292 -0.0004243041 0.0043054170 -0.0025230390 -0.0032372371 0.0011477078 0.0042452039 0.0005552111 0.0018340388 0.0001875261 -0.0002766800 0.0000248622 -0.0054211488 -0.0006450213 -0.0044241005 -0.0035069962 0.0019657040 0.0081830582 0.0008743999 -0.0072018800 0.0175263053 -0.0214946651 0.0425543470 0.1202228492 0.1224479625 0.0474236026 -0.0000254165 0.0026480726 -0.0031932170 0.0005937618 0.0002324995 -0.0025259626 0.0036914898 -0.0035217970 -0.0021631985 -0.0026881929 -0.0009962222 0.0007230625 0.0003288710 0.0004966182 0.0007219735 -0.0030431877 -0.0000376833 0.0000337650 -0.0001918728 0.0001045325 0.0001608560 0.0025452428 0.0008360921 0.0000588151 -0.0017143227 -0.0003116192 0.0004393058 -0.0007980121 0.0004279650 0.0005620411 -0.0003978073 -0.0013308021 0.0050835362 -0.0029554377 -0.0021934196 -0.0027957566 -0.0023486442 0.0009167733 0.0025075645 -0.0017112791 -0.0035573454 -0.0003034652 -0.0016255237 -0.0005609370 -0.0000067350 0.0006231115 0.0010728974 0.0007945580 0.0007897488 -0.0015448181 -0.0017051657 0.0008542782 0.0015623327 0.0010503362 -0.0033752680 0.0010526452 0.0016568499 -0.0026435505 -0.0035783695 -0.0013793644 -0.0035927350 0.0014119138 0.0022442227 -0.1265559765 0.1251189224 -0.0328074964 -0.1271121841 0.0587522221 -0.0205579664 -0.1318818321 -0.0071136823 0.0037719097 -0.0094678706 0.0073298668 -0.0047859111 -0.1187965554 0.0473333937 0.0579687643 -0.1264395474 0.0819818416 0.0406085066 -0.0966105189 0.0409328669 0.0101410019 -0.1923332285 -0.0234982941 0.0824341139 0.1121938360 -0.0351382887 -0.0170735919 -0.2182304054 0.0042457786 0.0577978207 -0.1247373099 0.0402229462 0.0547217704 0.1358388969 0.0533772093 0.0250287363 0.1301386039 0.0307154355 0.0076371072 0.0015136304 0.0316950706 -0.0057951055 0.1045453272 0.0570219064 0.0791846680 0.1220642335 0.0687847453 0.0813749283 0.1120145000 0.0150293351 0.0412423871 0.1798995249 0.0265666568 0.0727954049 -0.1059929856 -0.0416984273 -0.0377187253 0.1987083840 0.0456637859 0.0692730463 0.1292282399 0.0186198893 0.0732940888 0.1726739596 -0.0399404283 -0.0003371510 0.1465827463 -0.0593926357 -0.0341440010 -0.1474671741 -0.0741614391 -0.0236769806 -0.1399906548 -0.0887067270 -0.0732020150 -0.0316056024 -0.0580311168 0.0112919966 0.0497425725 -0.0695989487 -0.0296547331 -0.0273142310 -0.0430851056 0.0575823151 -0.0030388767 -0.0223703469 -0.0205091627 -0.0299427241 -0.0207445107 0.1124357842 -0.0386383079 0.0368170592 -0.0509761700 0.1008388018 -0.0408836035 0.0284926268 0.0886294657 -0.0233186717 -0.0064146809 0.1303651455 -0.0214495572 0.0867533138 0.1213276830 0.0252780668 -0.0012554894 -0.0733027400 -0.0674030762 -0.0010096077 0.0007679280 -0.0709408833 0.0450594331 -0.0615859701 -0.0834921285 -0.0913901070 -0.0686316784 -0.0383143759 -0.0924854920 -0.0606613590 -0.1096694266 -0.1387615456 -0.0645722546 -0.0125560740 -0.1428059477 0.0237890458 -0.0741691233 0.0314905329 -0.0442552211 0.0056152863 -0.0050907326 0.0620290179 -0.0759810906 0.0419925378 -0.0359616279 0.1036935380 0.0123551391 0.0011736146 0.0032492249 0.0000861125 -0.0015067391 0.0014484464 0.0017115928 0.0017179924 0.0036035351 0.0025757447 0.0042731771 0.0048356381 0.0006150511 0.0022542013 0.0047091139 0.0015452887 -0.0120392974 -0.0171776015 0.0032975966 0.0112087593 0.0116386532 0.0217357113 0.0082533817 0.0169835843 -0.0164512805 -0.0073583168 0.0215501628 -0.0092385370 0.0181618700 0.0105739493 -0.0025941794 -0.0008218388 0.0112468699 -0.0034844962 0.0015029107 -0.0051663546 -0.0153718202 0.0121801585 0.0185263061 -0.0028200623 0.0098713671 -0.0203569449 0.0179217468 -0.0002137756 -0.0016980032 0.0060325075 -0.0049267866 -0.0105774101 0.0044838385 -0.0083984917 -0.0315363990 0.0014482120 0.0094701091 -0.0022759911 0.0239964022 0.0228708871 -0.0004158078 0.0166129059 0.0219496831 0.0066972771 0.0179333037 0.0286164267 0.0086887884 0.0125134113 -0.0156934689 0.0087698956 -0.0459582866 -0.0371519061 -0.0319344832 0.0120541088 0.1069712960 0.0074840303 -0.0442098283 -0.0094534024 -0.0123850641 -0.0078894790 -0.0020051248 -0.0040100487 -0.0127883550 -0.0066985625 -0.0007359733 -0.0218865109 0.0228214277 -0.0138714396 0.0042281177 -0.0021580879 0.0029044154 -0.0067493761 0.0038490677 -0.0079372560 0.0180256993 -0.0129516990 -0.0157728853 -0.0232568284 0.0461894857 -0.0241115013 0.0453724059 0.0014959205 0.0008707432 -0.0022247579 0.0287263960 -0.0282458407 0.0528321460 0.0588122972 0.0404680853 -0.0280133624 0.0706213264 0.0185588919 -0.0126761297 0.1168338171 -0.0175517601 -0.0295172337 -0.0247322482 -0.0233036833 0.0120080277 0.0064162464 0.0197605315 0.0081626534 -0.0327847190 0.0002840433 0.0181950016 -0.0358063263 -0.0254505607 -0.0017655453 -0.0002344847 -0.0103189414 -0.0008586514 -0.0119856251 0.0260422660 0.0005583566 -0.0591312435 0.0159267516 0.0297403581 -0.0408247702 -0.0409872883 -0.0136405397 0.0248123417 -0.0268253676 -0.0143115868 -0.0167825248 0.0484902310 -0.0089056828 0.0234626769 0.0280515528 0.0091559448 -0.0612052187 -0.0017581022 0.0333030260 -0.0603618141 0.0218963126 0.0667050781 -0.0204985060 -0.0255292524 -0.0067606718 0.0848193406 0.0141791255 -0.0397268235 0.0358233398 -0.0096203705 -0.0116625516 0.1361560818 -0.1909979244 -0.0998743267 -0.1523829118 -0.0501762911 0.0044087655 -0.0720402370 0.0562721890 -0.0210059184 -0.0165407858 -0.0353061395 0.0560220113 -0.0133873608 -0.0406649489 -0.0357672546 0.1111573624 0.1448547525 0.0391665176 -0.1446836765 0.1069307928 0.1282991072 -0.0391298364 0.0721802327 -0.0251743103 -0.0970218219 0.1350952308 -0.0511667470 0.0070666212 0.0167920177 -0.0128299588 0.0593310755 0.0131891185 -0.0001772952 0.0144120323 -0.1010342497 0.1590733486 0.0249589001 -0.0068224558 0.0215480296 0.0819718412 0.0668401883 0.0318231034 0.0680483986 -0.1807707097 -0.1997917789 0.0790221026 0.0361919422 0.0188810660 -0.2517393157 0.1959444252 0.2119073763 -0.2028642504 -0.1295149704 0.0137642701 -0.2479494788 0.1736480160 0.2244394400 -0.0162366653 0.0185939921 -0.0109642754 -0.0146986710 0.0134945999 -0.0131920403 -0.0202718631 -0.0053542975 0.0055043304 0.0001010015 0.0060317850 -0.0025914832 -0.0127459322 0.0130952245 0.0022096820 -0.0211603537 0.0022864173 0.0075756041 -0.0117445845 0.0150761897 -0.0146305299 -0.0337761862 -0.0144743010 0.0251041464 0.0159562887 -0.0018349318 -0.0018333860 -0.0209841902 0.0120232219 -0.0005722324 -0.0243960492 -0.0155720565 0.0177733911 -0.0209569739 -0.0183958345 -0.0008778852 -0.0295754017 0.0066296614 -0.0047086486 -0.0004343678 -0.0059135902 0.0012603239 -0.0141539939 -0.0209556443 -0.0109086795 -0.0281237568 -0.0019688257 -0.0169873512 -0.0129363398 -0.0196939561 -0.0011960035 -0.0448290709 0.0189882484 -0.0210426408 0.0193001184 0.0076185594 0.0071102534 -0.0248591588 -0.0310215381 -0.0056309042 -0.0360136623 0.0198033107 -0.0189545425 0.0197529326 -0.0053254694 0.0013208965 0.0218110070 -0.0082442798 -0.0040720607 0.0265254678 0.0141161735 0.0043267808 0.0253143241 0.0157002561 0.0136289424 -0.0080238107 -0.0040818510 0.0032127748 0.0019004717 -0.0118634939 -0.0112101730 -0.0080514319 -0.0011967970 0.0157660901 -0.0097721684 -0.0067178351 -0.0093310002 -0.0058328191 0.0048278266 0.0309877408 -0.0151997890 -0.0037711452 -0.0215907549 0.0078645284 -0.0033010612 0.0113165610 0.0041293833 -0.0023753146 0.0027522217 0.0127423016 0.0032713113 0.0290041151 0.0099865304 0.0071070472 0.0096147065 0.0026012350 0.0144468623 0.0036993232 -0.0078121278 0.0079227184 -0.0098595060 0.0160895161 0.0092540698 0.0010435002 0.0041759519 0.0063107331 0.0068483245 0.0294700870 0.0046248213 -0.0039159298 0.0074869344 -0.0017629207 0.0154460656 0.0001252769 0.0031101544 -0.0191849100 -0.0081674408 0.0022061541 -0.0058190201 0.0094260788 -0.0031630490 -0.0277313222 -0.0148949531 -0.0095988907 -0.0049753910 0.0742471295 0.0830707647 0.0065492445 -0.0017179375 0.0351572643 0.0492496671 0.1120045989 0.1573327850 0.0125890713 0.0574288644 0.1287917945 0.0430319260 0.0961187198 -0.0440465763 -0.0429886089 0.0462168695 -0.1254562698 -0.0402554335 0.1638899088 -0.0800424382 -0.0112067403 0.0285368004 -0.0107752607 -0.0735339690 0.0604078666 -0.0923521663 0.0483305822 -0.0675703075 -0.0451221917 -0.0270562744 0.0094068944 -0.0387553794 -0.0027709867 0.0068674404 -0.0074105596 0.0238396242 -0.0063484395 -0.0618576527 0.0343460284 -0.0449075189 0.0758792545 0.0182011610 0.0253029290 0.0058141554 -0.0404063023 0.0268609697 0.0414487521 0.0321563724 0.0618639433 0.1118400751 0.0529633347 0.0118310339 0.0233649297 -0.0077112694 -0.1272538773 -0.0496712907 0.0601675909 -0.0402835879 0.0039516817 -0.0172422166 -0.0562631588 0.0300481384 -0.0408865081 0.1145047331 -0.0641480955 0.1111605236 0.1192733317 0.0357264424 -0.0718407838 0.0078813234 -0.0036106758 0.0157069756 0.0141820439 -0.0063905583 0.0228371437 0.0058768627 -0.0035207258 0.0110258317 0.0076653345 -0.0107882777 0.0201158334 -0.0113794852 0.0070153234 -0.0138385299 0.0004262335 -0.0013146050 0.0004022752 -0.0109573456 -0.0006156084 -0.0094345624 -0.0011375604 -0.0093182931 0.0112459535 -0.0262094404 0.0161622750 -0.0386363697 -0.0005860872 -0.0004613605 -0.0064065360 -0.0265828073 0.0049620582 -0.0347605572 0.0073743833 -0.0034024356 0.0058595648 -0.0107748249 0.0055502278 -0.0186036065 -0.0071923387 0.0024763744 -0.0182906249 -0.0073078235 0.0034453258 -0.0159781727 -0.0034139758 0.0005476098 -0.0127860998 0.0015283767 -0.0004868208 0.0057629060 0.0033084606 -0.0005373272 0.0016481931 0.0052523611 -0.0018973683 0.0077735641 0.0025794329 -0.0008963035 0.0069824645 0.0065491091 -0.0023469305 0.0166447981 0.0065023881 -0.0025375524 0.0083159787 0.0051249273 -0.0005257886 0.0202778740 0.0068159920 -0.0009542801 0.0171488588 -0.0081863705 0.0034584816 -0.0281643483 -0.0190573818 0.0076454068 0.0071872647 -0.0457843642 0.0484918998 -0.1103611163 0.1419923485 0.1151366662 0.0314165438 0.0293819935 0.0066927108 -0.0156197194 0.0135746136 -0.0027812684 -0.0058280580 0.0462255591 -0.0637322817 -0.0289610138 -0.0511334061 -0.0161549417 0.0012082499 -0.0270243270 0.0188225607 -0.0181523003 -0.0027263422 -0.0130843842 0.0178791930 -0.0048526362 -0.0140918486 -0.0125391271 0.0394696024 0.0453799258 0.0133688292 -0.0464371752 0.0340162433 0.0400449632 -0.0111975752 0.0279230817 -0.0198791824 -0.0353992631 0.0452829278 -0.0280745507 0.0010192333 0.0036097709 -0.0161675398 0.0133706499 -0.0049273777 -0.0133413250 0.0042348334 -0.0198490790 0.0625188238 0.0224280328 -0.0065349244 0.0061436306 0.0268368843 0.0224014720 0.0130890515 0.0223143273 -0.0613041119 -0.0652592899 0.0260144322 0.0074251717 0.0038635841 -0.0824470588 0.0624494453 0.0662926339 -0.0658393757 -0.0443912286 0.0018092046 -0.0809986249 0.0590424664 0.0720860380 0.1020244584 -0.1064262589 0.0484958459 0.1159103961 -0.0420537478 0.0266988537 0.1200895571 0.0068537716 -0.0083649308 0.0061127128 -0.0247733060 0.0120904029 0.1002309751 -0.0375056747 -0.0500593363 0.1142293006 -0.0517147730 -0.0283845612 0.1111979260 -0.0136214428 -0.0064001269 0.1827103222 0.0350887265 -0.0941463036 -0.0947339679 0.0204099208 0.0134299850 0.1783517705 0.0107446783 -0.0640324441 0.1161218979 0.0043498984 -0.0520073657 0.1538353703 0.0854051436 0.0028290692 0.1505846249 0.0445007782 0.0113783613 0.0141217216 0.0112402659 0.0088112189 0.1003659903 0.0699933586 0.0755975199 0.1272954064 0.0809848620 0.0572643663 0.1290521418 0.0925180399 0.0024772649 0.2047820072 0.0629279296 0.0886305296 -0.1074748942 -0.0532952103 -0.0301053237 0.1714114911 0.0790387267 0.0608916196 0.1134653049 0.0501658601 0.0321313674 -0.1359241439 0.0330118943 -0.0040809256 -0.1297279539 0.0546390518 0.0266184516 -0.1540561052 -0.0709153068 -0.0254946669 -0.1549090609 -0.0918675391 -0.0840840168 0.0125546049 0.0153729358 -0.0058245856 -0.0208348159 0.0360249221 0.0258123671 -0.0065616098 0.0257497120 -0.0324470201 -0.0233665526 0.0165848662 0.0214626691 -0.0147486863 0.0132446419 -0.0629055593 -0.0023016429 -0.0136503250 0.0462258066 -0.0595703323 0.0076296302 -0.0063216861 -0.0651324361 0.0096000758 0.0009570699 -0.0741619624 -0.0058479907 -0.0470552497 -0.0766536537 -0.0089896978 -0.0209857560 0.0103373815 -0.0319739417 -0.0581441234 0.0131762396 0.0074416705 0.0012506588 -0.0740832633 -0.0053348791 -0.0411596510 -0.0656955607 -0.0501713027 -0.0627636508 -0.1334787454 0.0305665893 0.0129121149 -0.0954827994 -0.0377590398 -0.0419206246 -0.0651705550 -0.0249597024 0.0162653509 -0.0121752386 -0.0532258428 -0.0493796535 -0.1467087690 -0.0015044112 0.0277679371 0.0207888523 -0.0208021427 -0.0603611833 0.0253164463 0.0324011657 0.0024487418 -0.0033857170 0.0150163594 0.0178859267 0.0396920411 0.0601593855 0.0062223969 0.0189567703 0.0482342581 0.0151713310 0.0355518893 -0.0114065692 -0.0124239302 0.0066083988 -0.0551545337 -0.0094173846 0.0693019310 -0.0174652227 0.0185823156 0.0200356722 0.0084361870 -0.0362971346 0.0945408847 -0.0005570611 -0.1044839155 0.1570942389 0.0275585541 0.0504952493 0.0825927755 0.0141742572 -0.0018258301 -0.0070100029 0.0279427038 0.0939357460 0.0527078262 0.0059275548 -0.1039596547 0.1193279878 -0.0349161177 -0.0037776728 -0.0446812366 0.0527812778 0.0882530668 -0.0293133385 -0.0006725234 0.0144059159 0.0543717010 -0.0290750841 -0.0229665212 -0.0702885267 0.0365911369 0.0563133712 0.1761975306 0.0311516488 -0.0299903969 0.0545885563 0.0368391901 -0.1215238087 0.0793769473 -0.0889439418 0.0900517247 -0.1953871334 0.0893447824 -0.1350148582 -0.0758998426 0.0405029117 0.1691723919 0.0175641590 -0.0177483465 0.0081062275 -0.0027354703 0.0096842562 -0.0072088995 -0.0065287320 0.0059967433 -0.0047166771 -0.0151002002 0.0038380508 -0.0197990087 0.0046152812 -0.0014693527 0.0211452570 -0.0061513094 -0.0031860031 -0.0063106146 0.0088683451 -0.0120183818 0.0171534406 -0.0125635814 0.0178980434 -0.0183307652 0.0243803979 -0.0094591795 0.0555044451 -0.0032667717 -0.0044485350 -0.0089719140 0.0349020657 -0.0261570006 0.0572256636 -0.0014879143 -0.0071374580 0.0034334412 0.0040924014 -0.0039858007 0.0081624629 -0.0028410703 0.0019256651 0.0026726071 0.0052223573 -0.0019745741 0.0108752693 0.0032212159 0.0006908849 0.0074761914 -0.0018393646 0.0026666055 -0.0052138867 0.0001601917 -0.0008743757 0.0002768778 -0.0038466462 0.0005226205 -0.0078010751 -0.0008140530 0.0023568731 -0.0018702094 -0.0077148131 0.0049058858 -0.0162153392 -0.0029931069 -0.0015292928 -0.0062525588 -0.0099276703 0.0020258470 -0.0190693352 -0.0031350839 0.0026485808 -0.0072957298 0.0076953148 0.0004635137 0.0146715243 0.0140290490 0.0001250852 -0.0149492346 0.0453013705 -0.0417489603 0.1681742755 0.0202213470 0.0053106220 0.0430889171 -0.0035526974 0.0046987113 -0.0029194229 -0.0003769528 0.0030322933 -0.0032670841 -0.0034648826 0.0100567963 0.0007334165 0.0027071339 -0.0003509402 0.0019559771 0.0101914830 -0.0050204130 0.0087035203 -0.0086011866 0.0006228552 -0.0004073129 0.0002989725 0.0018748768 0.0019716926 -0.0010676194 -0.0044531542 -0.0023977218 0.0049800112 -0.0049028376 -0.0041721254 0.0045480049 -0.0060082239 0.0077901616 0.0076187261 -0.0074910448 0.0203737171 0.0042790122 -0.0107445912 0.0017577401 -0.0013075722 0.0074702294 0.0119658097 -0.0087658345 -0.0044945822 -0.0205658198 -0.0173401371 0.0038652002 -0.0011993206 -0.0034106688 -0.0050741835 -0.0117837384 -0.0039346002 0.0102024661 0.0035718792 -0.0055518119 0.0107562404 0.0045988966 0.0079133391 -0.0064868212 -0.0053854669 0.0062210097 0.0009595610 -0.0018460976 0.0070428767 -0.0074028988 -0.0059445715 0.1345603442 0.0086200877 -0.0190650730 0.0914183170 -0.0511351193 0.0711243967 0.0933482403 -0.0175221234 0.0303659426 0.0364857345 0.0803003777 -0.0691832335 0.0702265043 -0.0495009103 -0.0039340136 0.0851705490 -0.0636625353 0.0367613089 0.0357926091 -0.1436914949 0.1554898456 0.1121097843 -0.1190015536 0.0537503265 -0.0756955709 0.0458418714 -0.0361124195 0.0862890360 -0.1069307150 0.0627879531 0.0321658725 -0.1105887303 0.1096388067 0.0128098894 -0.0025045385 0.0415254254 0.0035975150 0.0230222953 0.0018591218 0.0076506077 -0.0030200964 -0.0008725497 0.0275504244 0.0137314604 0.0280037912 0.0106945677 0.0332661744 0.0462955423 -0.0026486387 -0.0267194549 0.0518574798 -0.0098832702 0.0420699333 -0.0082671833 -0.0121792478 -0.0167093184 -0.0215807868 0.0602466439 0.0193162067 0.0218562567 0.0111874600 0.0520547490 0.0527449588 -0.0893514033 -0.0055718857 -0.0041221930 -0.1468332459 0.0314481568 0.0321222240 -0.0474930188 -0.0259455882 -0.0185041884 -0.0017914489 -0.0062679631 -0.0108597909 -0.0142771004 -0.0521450250 0.0469077586 -0.0188080381 -0.0270076443 0.0905193737 -0.1151722566 -0.0075276177 -0.0588407168 -0.1040834231 0.0626279415 0.0492283252 -0.2095142762 -0.0466022695 -0.1588264504 -0.1005915753 0.0684880619 0.0720536364 -0.0583262051 -0.0625975625 -0.0336110529 -0.0950805030 0.0470074947 0.0087959936 -0.0370290156 -0.1039100724 -0.1396812951 -0.0682008003 0.0827243440 -0.0476709446 -0.0596305217 0.0385438798 0.0434481025 -0.0393540151 0.0029123353 -0.0251240032 0.0421730555 0.0038723236 -0.0827932434 -0.0365997732 0.0048937926 -0.0581081290 0.1416466203 -0.0550060508 -0.1599405601 0.0131840982 -0.0444776002 -0.0507107345 0.0143837530 -0.0579357303 -0.0998032312 -0.1118249486 0.0193193865 -0.0555652796 0.1125834691 -0.1060340935 -0.1567814913 -0.1433888965 0.0399107957 -0.0350514058 0.0024036698 -0.0021380839 -0.0027792216 0.0093044098 -0.0019836453 -0.0032322362 -0.0025631923 -0.0118623114 -0.0037020841 0.0085058405 -0.0014185621 -0.0032935993 -0.0066294506 -0.0002400417 0.0030476274 -0.0117621651 0.0003952889 0.0074033809 -0.0065323245 -0.0033610228 0.0006903747 -0.0075171061 -0.0011659313 0.0045603591 0.0049659631 -0.0006097257 0.0148510772 -0.0120160300 0.0026124337 -0.0125978734 -0.0027861775 0.0047345195 -0.0060170033 0.0016966723 -0.0150037815 -0.0295172843 0.0091475433 0.0060250721 0.0200941738 -0.0141599606 -0.0034373994 0.0293407098 -0.0033490956 -0.0012624575 -0.0052276659 0.0050701589 -0.0018519538 0.0237710416 0.0152024307 -0.0155504269 0.0205001983 0.0291774410 -0.0030334200 0.0304619447 -0.0122045118 -0.0080698327 0.0327407629 0.0118400585 0.0042111601 0.0415217513 0.0153165432 0.0290179733 -0.0112836395 0.0295171483 -0.0136229323 -0.0266553290 -0.0306270396 -0.0317214589 -0.0241174782 0.2196051035 0.0162632219 -0.0304486993 -0.0456371792 -0.0324123427 -0.0569465772 -0.0321295499 -0.0053960187 -0.0818344234 -0.0937736262 0.0628028778 -0.1762168316 0.1024077338 -0.0693159759 0.0800540442 -0.0097834653 0.0143819338 -0.0301334843 0.0685112768 -0.0289092814 0.1055530243 -0.0712672071 -0.0063401947 -0.1448830763 0.2713075543 -0.1657792595 0.3614555493 0.0197776408 -0.0033821959 0.0466296109 0.2626593947 -0.1472121417 0.3934353431 0.1065828640 0.0899954512 -0.0551414110 0.1404137156 0.0288595386 0.0055354245 0.1933958249 -0.0047238109 -0.0884236421 -0.0126501768 -0.0493708917 0.0755466816 0.0269902174 0.0293165570 0.0478750870 -0.0597613772 0.0015622012 0.0066363303 -0.0577402457 -0.0435521642 0.0080777733 -0.0153002047 -0.0118778288 -0.0364564284 -0.0208155975 0.0453683787 -0.0165855663 -0.1262855155 0.0359636095 -0.0255903822 -0.0808054101 -0.0651961465 -0.0417951454 0.0019106696 -0.0327160347 -0.1124442724 -0.0408473735 0.0858691993 -0.0617042151 0.0693436190 0.0367997080 0.0874053687 -0.0863677866 -0.0202860887 0.1019105383 -0.0982650828 0.0108992565 0.0693093491 0.0321139086 -0.0179452905 0.0080821121 -0.0184039989 -0.0288091633 0.0331103663 -0.0157396348 -0.0094982456 0.0236823703 -0.0387018638 0.0378612002 0.0081416725 0.0409238417 0.0139933099 -0.0021561123 0.0184071659 -0.0145311248 0.0107957700 0.0064960012 0.0130558726 -0.0149510995 0.0048942934 0.0107897431 0.0091185892 -0.0404904889 -0.0215572189 -0.0085051403 0.0256914503 -0.0141053119 -0.0176720525 0.0046041468 -0.0262108570 0.0150215394 0.0279043079 -0.0360902532 0.0106256089 -0.0017447523 0.0049167187 0.0157527986 0.0056311553 0.0139498461 0.0047724087 0.0052234848 -0.0006941411 -0.0571183152 -0.0330053074 0.0053835741 0.0027978456 -0.0164247421 -0.0136601735 -0.0072551486 -0.0134866716 0.0426385757 0.0465400859 -0.0161110135 -0.0063940314 -0.0032432332 0.0523399485 -0.0320849326 -0.0331620081 0.0406384153 0.0412949844 0.0120130652 0.0532052336 -0.0418778191 -0.0431132767 0.0027745943 -0.0141101031 0.0039213361 0.0086467030 -0.0034140632 -0.0065160607 0.0077973891 -0.0004914731 -0.0013756423 -0.0006152636 -0.0070950393 0.0059105265 0.0090464349 0.0002746221 -0.0078066780 0.0059760075 -0.0078593402 -0.0053823689 0.0090448597 0.0067257296 -0.0185181298 0.0114591058 0.0099158805 -0.0107241856 -0.0067193096 0.0011291470 0.0064818724 0.0198392097 0.0120668502 -0.0150937109 0.0096623115 -0.0034196568 -0.0108914978 0.0156966139 0.0200391189 -0.0024789596 0.0099999197 0.0222709985 0.0039883906 0.0132715623 -0.0261690494 0.0146197990 0.0011955019 0.0179106180 0.0090168442 0.0077808120 0.0175375416 0.0000782568 0.0048413449 0.0539224903 -0.0138016151 0.0021652816 0.0614415383 0.0060474885 -0.0038541428 -0.0192738842 -0.0026703431 -0.0144060705 0.0501755031 -0.0009673661 -0.0136138537 0.0458126885 -0.0150311487 -0.0134129991 0.0054263918 0.0015441408 -0.0028967753 0.0039747536 0.0019133891 -0.0239599217 -0.0067281652 -0.0108505185 -0.0084522850 -0.0034469379 -0.0108236888 -0.0032896820 0.0061675495 -0.0093133431 -0.0069214018 -0.0048498817 -0.0309647984 0.0046087053 0.0148855912 0.0259246466 -0.0092153369 -0.0126436726 -0.0207923383 0.0186368707 0.0303969113 0.0656610399 -0.0091132190 -0.0240883870 -0.0351127135 -0.0042885906 0.0103452801 0.0242055465 -0.0079875967 -0.0028331040 0.0044278952 -0.0004381762 0.0260519867 0.0645638737 -0.0063619529 0.0018878622 0.0244267553 -0.0070663752 0.0133091980 -0.0082574258 -0.0147596108 0.0195565232 0.0005265779 0.0093526784 0.0006747714 -0.0189360551 -0.0217640830 -0.0078013239 -0.0057107677 0.0369156952 -0.0057932364 -0.0221374901 -0.0232255633 -0.0139488061 0.0061926166 -0.0051236935 -0.0106878042 -0.0210658040 -0.0163511068 -0.0123664359 -0.0130323973 0.0069169460 -0.0265934234 -0.0476238193 -0.0077159976 -0.0175254423 -0.0191297763 -0.0344301466 -0.0374188385 0.0057721942 -0.0360810595 -0.0112204292 -0.0139948361 -0.0315162158 -0.0338069432 0.0119058983 -0.0417174195 -0.0685421559 -0.0156534414 -0.0149073186 0.0162695202 0.0061012301 0.0079371777 -0.0194493190 -0.0241521096 -0.0460191269 0.0653057597 0.0317597596 0.0073460875 0.0508243603 -0.0452970828 -0.0061252101 0.0183458038 -0.0134352145 0.0315706949 -0.0192449660 -0.0426048868 -0.0061017772 -0.0018889085 -0.0049888497 0.0403120441 0.0261356088 0.0706933867 0.0382774126 0.0032536410 -0.0296018503 0.0176023010 0.0360433132 0.0454991379 0.0984417553 -0.0127006408 -0.0206204445 -0.0033728790 -0.0105043877 -0.0334669341 -0.0665689452 0.0690354311 0.0254257421 -0.0248593084 0.0002173432 -0.0246677350 -0.0242993509 -0.0370913823 0.0686572723 0.0280246196 0.0144041188 -0.1229388130 0.0033857265 -0.0380964712 0.0155759328 -0.0208807798 -0.0115097317 0.0077719972 0.0439336907 0.0594305442 0.0422223874 0.0691470401 -0.0340816223 0.0663086275 0.0033124649 0.0049374546 0.0010580337 -0.0139867719 0.0066587045 -0.0163920795 -0.0425138758 0.0169302282 -0.0577666105 0.0181299194 -0.0106658362 0.0410743687 -0.0110790345 -0.0025921855 -0.0159812502 0.0205302111 -0.0221275067 0.0379313365 -0.0367038076 0.0204868732 -0.0513651686 0.0807639962 -0.0460116189 0.1450551593 0.0059829391 -0.0115013688 0.0033509537 0.0965566147 -0.0663540350 0.1518979286 0.0170388271 -0.0050094290 0.0099926416 0.0021859238 0.0006036277 -0.0076967472 -0.0098559771 0.0136248129 -0.0455729035 0.0023515933 -0.0042668873 0.0107189437 0.0015530764 0.0024080586 0.0064729377 -0.0050210193 0.0014614450 -0.0029963786 -0.0025891579 -0.0029881496 0.0039920113 -0.0040235272 0.0000058363 -0.0059825599 -0.0018927039 0.0033280142 -0.0005466515 -0.0139327052 0.0053083466 -0.0151979720 -0.0087565589 -0.0020826733 -0.0092731032 -0.0062995342 -0.0006948261 -0.0215970036 -0.0046753653 0.0053171049 -0.0070354929 0.0041135173 0.0028767461 0.0088639030 0.0053488310 0.0009734734 0.0128744004 0.0072904661 -0.0112098248 0.0228803106 -0.0695630571 0.0991635502 -0.0581436895 0.0012167666 -0.0013306916 -0.0000865328 0.0007060528 -0.0007015699 0.0013834501 -0.0010012627 0.0023814092 0.0000750920 0.0001643306 0.0001171173 0.0005657657 0.0019111887 -0.0011736869 -0.0023856517 -0.0036778819 0.0011848386 -0.0005255574 -0.0000022432 0.0003919452 0.0003456471 0.0007519012 0.0012673381 -0.0003041919 -0.0002527040 0.0009499197 0.0008556540 0.0029127623 -0.0020177188 -0.0011714677 0.0007198107 -0.0023169851 0.0030797025 -0.0004421957 -0.0032666798 -0.0050138716 0.0002398391 0.0041697387 0.0030928831 -0.0029485556 -0.0029337141 -0.0085697202 -0.0077248741 0.0035831825 -0.0012477615 -0.0007718799 -0.0009927459 -0.0022073417 -0.0009167055 0.0020526300 0.0013332395 -0.0014892695 0.0015006119 0.0004975075 -0.0007571392 0.0016224765 0.0016099802 -0.0004718023 -0.0005272217 0.0004125834 -0.0005655419 0.0005574416 0.0011396411 -0.0197056582 0.0192165619 -0.0015967313 -0.0206818361 0.0141393550 -0.0009615416 -0.0221960541 0.0012526488 0.0010991764 -0.0055456709 -0.0003829078 0.0012161186 -0.0239848509 0.0096593850 0.0100449114 -0.0227357176 0.0184255424 0.0058123707 -0.0162973361 0.0084162021 0.0078355288 -0.0299536274 -0.0021266930 0.0120300611 0.0171705318 -0.0073055168 -0.0033244917 -0.0403536572 0.0050503364 0.0074961523 -0.0228121976 0.0206183637 0.0049952559 -0.0023568994 -0.0307302550 -0.0346328226 0.0219686472 -0.0747043555 -0.0116590810 -0.0384111799 0.0837272110 -0.0387395727 0.0182764391 -0.0541483082 -0.0224493456 0.0150259024 -0.0430347506 -0.0297771856 0.0442987858 -0.1265913269 -0.0041728516 0.0773302548 -0.2045015874 0.0187950214 -0.0200119206 0.0555528022 0.0222326614 0.0660097766 -0.1733704845 0.0138500738 0.0784039609 -0.1636348714 0.0031418955 0.0306598906 -0.0065268463 -0.0005929395 0.0217951749 -0.0090620489 -0.0065213370 0.0658901182 0.0270003642 0.0457674422 -0.0361760520 -0.0238101854 0.0162533504 -0.0233937213 -0.0186552128 0.0403233757 0.0370414548 0.0133859342 0.1039384945 -0.0698118994 -0.0467400697 -0.0682776920 -0.0417442403 0.0242555531 0.0817941446 -0.1040662010 -0.0984166304 -0.1976727840 -0.0468269462 0.0631344291 0.1180075905 0.0017704899 -0.0604986783 -0.0534759094 -0.0059462421 -0.0105058954 -0.0045858154 -0.0253842416 -0.1109221130 -0.1896914219 0.0055013414 -0.0019514012 -0.0933061740 0.1300497968 -0.0591172837 -0.0546494094 0.0735619325 -0.0553843916 -0.0687153940 -0.0955027804 0.0638741406 0.0669886120 0.0404166007 0.0024324751 -0.0203612980 -0.3370819955 0.1648819875 0.1849158514 -0.0166593695 0.0210371417 0.0304100591 -0.1161436709 0.0606932028 0.0525756811 0.0544404965 -0.0218979743 -0.0628793638 -0.3255760505 0.1843676439 0.2085722088 0.0337372337 -0.0246502927 -0.0525410382 -0.0008004022 0.0003114054 -0.0012699183 -0.0062848261 0.0023269199 -0.0022279141 0.0015732990 0.0041942072 0.0010494225 -0.0022618332 -0.0037219350 -0.0038755991 0.0050956510 0.0026495259 0.0030631049 -0.0046937072 -0.0229729012 0.0001879617 0.0110271178 0.0126416616 0.0227862491 0.0119888323 0.0162524277 -0.0170647098 0.0092797064 0.0316244586 0.0195718971 0.0056273385 0.0143039735 -0.0751235433 -0.0158244861 0.0343653179 -0.0286767939 0.0596508489 -0.0193903184 -0.0127208649 0.0956366829 0.0286279311 0.0152750252 -0.0132843001 0.0044378006 0.1302376804 0.0616075094 -0.0101847124 -0.0059345950 0.0037275967 -0.0248055658 0.0475761945 -0.0028107191 -0.0316780635 0.0689976348 0.0691721944 -0.0153354833 0.0863403025 -0.0031836019 -0.0128486464 0.1412264476 0.1128363581 0.0066230365 0.0024020585 0.0594847307 0.0494530194 -0.0064495458 0.0277640123 -0.0343263215 -0.1136225407 -0.1517128185 -0.0597458069 -0.0034456917 -0.1152819096 0.1307691422 -0.2898780673 -0.0304727465 -0.0376509820 -0.0221808714 0.0323226990 -0.0286623177 0.0200098599 0.1044968203 -0.0377834129 0.1197841961 -0.0143973511 0.0027511071 -0.1070771869 0.0281361968 0.0142209386 0.0369167695 -0.0417746998 0.0550548241 -0.0725995998 0.0880768266 -0.0772221387 0.1042316184 -0.1520297424 0.0825354903 -0.3338330696 -0.0228526145 0.0395148755 -0.0079728875 -0.2131613277 0.1511344619 -0.3313575436 0.0059328121 0.0712178472 -0.0748863298 0.0823499036 0.0186036333 0.0265510789 0.1621055398 -0.0526803841 0.1122037436 -0.0183493833 -0.0145591802 0.0028991132 0.0082547192 0.0100295342 0.0021820233 -0.0183745618 -0.0065105742 0.0163223535 -0.0267412162 -0.0161665940 -0.0054748470 0.0053322702 -0.0065518878 0.0017956611 -0.0045388858 0.0141831011 -0.0055610248 -0.0255016294 0.0001884876 0.0447119242 -0.0157931309 -0.0348208862 0.0179279955 0.0294263041 -0.0191616262 0.0135285407 -0.0048274583 0.0312340546 -0.0050061516 0.0214530053 0.0125453868 0.0139435386 -0.0909305461 -0.0047057667 0.0002692716 -0.0903627739 0.0726154945 0.0716643661 0.0375279983 -0.0346399650 -0.0087149584 -0.0215107395 -0.0070842947 0.0127500741 -0.0180773857 -0.0013656969 0.0043374260 -0.0186418136 0.0104193393 0.0019535883 0.0251857687 0.0090621966 -0.0018141237 0.0099655133 -0.0076092536 0.0181371929 0.0050919081 0.0116276508 -0.0087958781 0.0036249479 0.0081777321 0.0070946043 -0.0303384278 -0.0202357199 -0.0009774239 0.0158482140 -0.0128227973 -0.0142979681 -0.0083676465 -0.0234533352 0.0222013809 0.0204848844 -0.0263803655 0.0107330823 -0.0052426895 0.0148473031 0.0276709299 -0.0173106697 -0.0020808001 0.0089876458 -0.0030687138 0.0345509873 -0.0255837444 -0.0095102539 0.0063432227 -0.0014669330 -0.0077691829 -0.0041513076 0.0010290735 -0.0061950314 0.0253010978 0.0283098192 -0.0071561503 -0.0030401101 -0.0002889435 0.0356493628 -0.0286404257 -0.0291470706 0.0262070664 0.0306635007 0.0060946356 0.0342555804 -0.0275723990 -0.0312170253 -0.0229916795 -0.0188041572 0.0121401461 -0.0043017862 0.0081397897 -0.0210175155 -0.0062795197 0.0054108761 -0.0089423073 -0.0090028252 -0.0233487597 0.0198817140 -0.0058917875 0.0148570012 -0.0099851031 -0.0140226391 0.0037720573 -0.0098687589 0.0069982659 0.0400807900 -0.0540693859 -0.0025360891 0.0369917289 -0.0275547439 0.0058831413 -0.0070373201 0.0149000951 0.0041782334 0.0455014557 -0.0369602401 0.0001504321 0.0240244532 -0.0324445002 0.0164448022 0.0217370168 -0.0238901664 0.0089185550 0.0206562976 0.0048519555 0.0158593434 -0.0366718365 0.0221959406 -0.0095039491 0.0179407603 0.0016627718 0.0109519216 0.0069536734 -0.0225499749 0.0086582175 0.0797912071 -0.0443576055 0.0014971289 0.0748625716 0.0113354707 -0.0019389931 -0.0178489243 0.0072204713 -0.0509062620 0.0674148173 -0.0110217844 -0.0229314140 0.0423911801 -0.0494919085 0.0001883042 0.0082224125 0.0034459723 0.0250948608 -0.0013749603 -0.0034836241 -0.0095143202 0.0032322480 -0.0051755087 -0.0132232403 0.0006440673 -0.0112504451 -0.0427694410 0.0047303020 0.0076038826 0.0217067370 -0.0023929580 0.0055915384 -0.0656564594 -0.0011520041 0.0131826565 -0.0829572492 -0.0190567933 0.0211008455 -0.0493032084 -0.0045545515 0.0081541893 -0.0890952845 -0.0119461313 0.0137882438 -0.0105013431 -0.0340562980 0.0220475140 -0.0311824071 -0.0232713778 0.0130592748 -0.0341037043 -0.0346239948 0.0136212804 -0.0096249063 0.0077373651 -0.0128476388 0.0705451367 0.0057418855 -0.0466966796 -0.0098426394 0.0219880485 -0.0480819883 -0.0181449019 0.0537920038 -0.0180038381 -0.0383765092 -0.0063353929 -0.0294451952 -0.0898534251 0.0924036296 0.0355376448 -0.0811523634 -0.0201275133 0.0530250774 -0.0940562023 0.0076937851 -0.0461543752 -0.0228417586 -0.0441869210 -0.0987559992 -0.1768838225 0.0374037125 -0.0238395546 -0.0108783767 -0.0710450150 -0.1122880683 -0.0194713066 -0.0223453924 0.0104285321 -0.0039285428 -0.0191550078 0.0063274995 -0.0276854880 -0.0388390860 0.0126598015 -0.0055350851 -0.0207016880 0.0086302277 -0.0264075984 0.0130876484 -0.0066311863 0.0171977012 0.0665114864 -0.0164853801 -0.0661736755 0.0142980097 -0.0506404787 -0.0246895342 -0.0136087416 0.0296997514 0.0322474488 0.0552526951 -0.0241142562 0.0644867958 0.0359903326 -0.0859798719 0.0110925522 0.0591062525 -0.0380816482 0.0720801508 -0.0128993700 -0.0124500160 0.1406738312 0.0536690360 -0.0073024179 -0.0758031789 0.0123043581 -0.0206995721 -0.0184497457 -0.0171990829 -0.0362478266 0.0176538645 0.0197109707 0.0002020606 -0.0031640010 0.0040111714 0.0047978204 0.0493071754 -0.0024649450 -0.0230888829 -0.1255617347 -0.0474703992 -0.0009128748 0.1900590450 -0.0376363158 0.0769772254 0.0101038249 0.1331138344 0.0154730241 0.0554036920 -0.1159797534 -0.1129423044 -0.1479988961 -0.1329942384 -0.0512791599 -0.0044366207 -0.1352475894 0.3281812900 0.0430269292 0.0591873684 0.0291946079 -0.0185347611 0.0421934750 -0.0005302378 -0.0710721913 0.0385182321 -0.0715445734 -0.0134578155 0.0209329736 0.0854430299 -0.0158130051 -0.0052559191 -0.0207685305 0.0353393934 -0.0274909333 0.0364740816 -0.0510119088 0.0953708526 -0.0564478019 0.0769471986 -0.0333788794 0.2350314120 0.0256075347 -0.0252714567 0.0136736484 0.1481763597 -0.0844610783 0.2105048168 -0.0700842525 -0.1137199091 0.1117664540 -0.1517310904 -0.0449461682 -0.0059163983 -0.2687596438 0.0526570421 -0.0541565662 0.0356522711 0.0341171233 -0.0133543974 -0.0141688776 -0.0267208647 -0.0070555407 0.0462598614 0.0097657270 -0.0270246713 0.0548641824 0.0364421012 -0.0026259676 -0.0039126183 0.0118131937 0.0030491140 0.0098629611 -0.0334021480 0.0033789692 0.0779121035 -0.0110576099 -0.0606877775 0.0448468742 0.0695362509 -0.0237164708 -0.0481863355 0.0385604941 0.0073980564 0.0117432662 -0.0691035184 0.0050393166 -0.0388336060 -0.0344712682 -0.0203940828 0.1971522696 -0.0206290623 -0.0496956285 0.2350463289 -0.2216744933 -0.0435770467 0.0265140596 -0.0344225481 0.0060227680 0.0068895200 0.0203294851 -0.0214557055 0.0182279005 0.0080435499 -0.0149573687 0.0186383585 0.0056056847 0.0102110937 -0.0163782120 -0.0068116217 0.0022379942 -0.0072555494 0.0063080129 0.0077187639 -0.0130683584 -0.0019869652 0.0002714860 -0.0019163255 -0.0044483515 -0.0040308317 0.0297796734 0.0075621628 -0.0035794480 -0.0052917304 -0.0012326199 0.0010833387 -0.0040694519 -0.0111117563 0.0183074675 -0.0092838515 0.0127671289 0.0049561149 -0.0065907864 0.0170796941 0.0162192067 0.0079768001 0.0142024776 0.0177302543 -0.0093646798 -0.0089847827 0.0060363563 -0.0267543135 0.0239457819 -0.0189469682 -0.0024560472 -0.0030180961 0.0034188694 -0.0010665954 -0.0071380548 -0.0007759999 -0.0018525646 -0.0108559832 -0.0066744188 -0.0204264880 0.0105349005 0.0118380601 -0.0128543813 -0.0317009039 -0.0137197419 -0.0197779653 0.0137954139 0.0145527823 0.0105382356 0.0137968502 -0.0147702457 0.0017923297 -0.0049706053 0.0033234456 0.0018186052 0.0019300892 0.0031104814 0.0070286097 0.0188054499 -0.0125442698 0.0005609115 -0.0070317680 0.0093651398 0.0027876104 -0.0003817217 0.0006303721 -0.0120686935 -0.0087119513 0.0013527040 -0.0020284222 -0.0219507447 0.0186549152 -0.0026787131 0.0077845396 -0.0057410815 -0.0049584851 -0.0282219013 0.0285061866 -0.0000457416 -0.0104372207 0.0073111101 0.0080435447 0.0127169603 -0.0033901974 -0.0021929176 0.0254166222 0.0025443043 0.0128921180 -0.0296552018 0.0154390998 -0.0108314105 0.0171850437 0.0018594090 -0.0019966289 0.0066310304 -0.0048860217 -0.0048466791 0.0586024246 -0.0187422152 -0.0172074359 0.0746654768 -0.0018425611 0.0059233827 -0.0164105948 -0.0021287571 -0.0415807460 0.0656815471 -0.0116248443 -0.0331517937 0.0519347375 -0.0250212365 -0.0030426841 -0.0031105370 0.0010667854 -0.0057559988 -0.0027998537 0.0029055303 -0.0146314952 -0.0036100789 -0.0110613515 0.0057827608 0.0053811085 -0.0059565572 -0.0450912727 0.0075739702 0.0379186367 0.0312334774 -0.0075737995 0.0253335853 -0.1006947701 0.0024480320 -0.0045367032 -0.1236296488 -0.0091595236 0.0306395222 -0.1032750951 -0.0205888379 -0.0580683250 -0.1320873408 -0.0096314306 0.0080151798 -0.0229172853 -0.0639370195 0.0063960100 -0.0536749250 -0.0126496387 0.0284630858 -0.0577592755 -0.0771011774 -0.0356059690 -0.0162552909 0.0416991766 -0.0078436208 -0.0120915080 0.0027678696 -0.0158450278 -0.0050125841 0.0283783857 0.0239690658 0.0103480398 -0.0213111283 0.0052155792 -0.0086216208 -0.0066859649 0.0256435287 0.0418781963 -0.0198098596 0.0185416686 -0.0235910131 0.0135154581 0.0147968142 0.0205145155 0.0090670833 0.0180385958 0.0285325738 -0.0081036236 0.0347260544 0.0301502688 -0.0085894593 -0.0113998341 0.0499702264 -0.0174632562 0.0213690328 0.0182108616 0.0187911092 -0.0147208532 0.0252234796 0.0120814702 -0.0094353790 0.0131454831 0.0104763459 -0.0215531071 0.0181259060 0.0246856129 -0.0101462070 0.0082394379 -0.0118086945 0.0128603562 -0.0412311243 -0.0229469347 0.0433700479 0.0554003096 -0.0409993352 0.0258991841 0.0084560520 -0.0145368789 0.0160885797 -0.0459544629 -0.0603986500 0.0695469339 -0.1628270089 -0.0099668847 -0.0080945725 -0.0798573886 -0.0143284917 -0.0047275113 0.0369802672 -0.0165430687 0.0232052628 0.0095476399 -0.0758730121 -0.0213560779 0.0147441286 0.0020235870 0.0998771426 0.0458035528 -0.0031020372 0.0363958994 -0.0069086965 -0.0252975543 0.0335771758 0.0285229290 -0.0633613662 0.0212667953 0.0518254175 -0.0227161947 0.0586769715 0.0838864829 0.0975164352 0.0832858234 -0.0298302655 0.0102823580 -0.1343134180 0.0018476278 -0.0308123595 -0.0112884538 -0.0108629055 0.0417748513 0.0204394704 -0.0327438011 0.0844066009 0.0298897999 0.0042697112 -0.0838470353 0.1713796120 0.0021551118 0.0214387451 0.0117868071 -0.0248743638 0.0124124648 0.0014676002 -0.0290451056 0.0166776524 -0.0564862807 -0.0025226046 0.0006230746 0.0456151837 -0.0201442908 -0.0167870149 -0.0066008965 0.0228473161 -0.0160987203 0.0182409665 -0.0134394767 0.0584729530 -0.0409664503 0.0475758177 -0.0502046375 0.1178164494 -0.0007517879 -0.0266339127 0.0195653668 0.0882427652 -0.0302416685 0.1267017534 -0.0321398715 -0.0727656930 0.0501968349 -0.0738586149 -0.0358621868 -0.0062418005 -0.1385534398 0.0177551779 -0.0308936989 0.0203218716 0.0114990383 -0.0087186030 -0.0135971911 -0.0034489568 0.0003861421 0.0249457183 0.0109098724 -0.0130411384 0.0235574648 0.0185273072 0.0016793898 -0.0081337168 0.0076398934 0.0057320603 0.0041063286 -0.0099561865 0.0031031503 0.0347784449 0.0040410209 -0.0274118694 0.0179017898 0.0421930534 -0.0107793054 -0.0277533349 0.0197007728 0.0053347127 0.0044052758 -0.0342821735 0.0024129960 -0.0258239459 -0.0065934393 -0.0081427282 0.0872219054 0.0124694405 -0.0135602052 0.1050614093 -0.0392484222 0.0032563866 0.0565894744 -0.1014291900 0.0312603034 0.0092857675 0.0060004953 -0.0073353340 0.0130935074 0.0028896144 -0.0042906714 0.0099988795 0.0013817797 0.0030898171 -0.0114908112 -0.0026888956 -0.0010556649 -0.0066252274 0.0055411594 -0.0053543078 -0.0041546640 -0.0069913783 0.0060355394 -0.0016661906 -0.0044401056 -0.0042289982 0.0190055170 0.0083464615 -0.0024319566 -0.0054363423 0.0028258994 0.0038542599 -0.0015699944 0.0099977847 -0.0066103322 -0.0104808715 0.0156713242 -0.0064947044 0.0030836644 -0.0000430158 -0.0049645268 0.0121935395 0.0045796682 0.0193868154 -0.0002621838 -0.0192146166 0.0109283103 -0.0046124954 0.0116867425 -0.0093160714 0.0019465606 0.0000760800 0.0001325120 0.0011516960 -0.0097786938 -0.0090857027 0.0008551605 -0.0043428308 -0.0035752209 -0.0161818164 0.0116025787 0.0121783702 -0.0107123270 -0.0202277410 -0.0064306990 -0.0149464315 0.0112943562 0.0126128291 -0.0971754164 -0.1156222662 0.1219903563 -0.0105855474 0.0348467773 -0.0304501158 -0.0013298188 0.0431059450 -0.0658051665 -0.0487057586 -0.1395697772 0.0975436851 -0.0137084978 0.0555942306 -0.0537002964 -0.0245464141 0.0418397062 -0.0256147296 0.0736889606 0.1795902008 -0.1615054729 0.0617642580 0.2071598608 -0.2095774035 0.0135270121 -0.0515201185 0.0567545325 0.0267803129 0.2221313857 -0.2048679400 0.0405016598 0.1969939546 -0.1532102453 0.0012026801 0.0095816165 0.0136637002 -0.0294460651 0.0601700236 0.0126593743 0.0258461488 -0.0684576170 0.0376439749 -0.0332449437 0.0423459937 0.0117866226 -0.0093829953 0.0083026130 0.0066374352 -0.0283316753 0.1013695731 -0.0169424769 -0.0760170065 0.1801111767 -0.0105492356 0.0223406554 -0.0410893122 -0.0122847379 -0.1006708045 0.1498580589 -0.0181609420 -0.0644461078 0.1008188558 -0.0267763379 0.0098082664 0.0327609646 0.0008188787 0.0681189343 0.0081643229 -0.0175385610 -0.0354469877 -0.0130503932 -0.0329096251 0.0364675629 0.0237233192 -0.0070866341 -0.0124119866 0.0403835406 -0.0351184693 0.0250853638 0.0617707087 0.0363943751 0.0393349488 -0.0201330728 -0.0264233624 0.0513018157 -0.0187356318 0.0454924202 0.0944692249 -0.0319206651 -0.0536624025 0.0577971898 0.0012193140 0.0879658393 0.0159374853 0.0317692997 -0.0057670397 0.0404025223 -0.0440296061 -0.0255252273 -0.0363691884 0.0190532937 -0.0443272999 0.0086517344 -0.0975597793 -0.0819412257 0.0227278426 0.0215766909 0.0047145887 -0.0619617346 0.0330219337 -0.0128471553 0.0289008090 0.0368014419 -0.0518799044 -0.0549033581 0.0159477725 -0.0271859688 0.0504390096 0.0197200342 -0.0750443215 -0.0703702978 -0.0142478027 0.0425130452 -0.0525774003 -0.0217425161 -0.0721774300 -0.0514065304 -0.0225623552 -0.1000687803 -0.0166452759 -0.0440216129 -0.1039250691 -0.0157128352 -0.0546676102 -0.1272518620 0.0101467999 0.0109642469 -0.0084607841 0.0096471129 0.0114340006 -0.0086145874 0.0114976314 0.0151195247 -0.0141221168 0.0000847146 0.0089772101 -0.0078296802 0.0091912457 -0.0097008070 0.0055167314 -0.0131921764 -0.0197391226 0.0173174440 0.0298886180 -0.0194377372 0.0157206244 0.0047934348 -0.0046329702 -0.0006933295 0.0314978146 0.0695852842 0.1745400829 0.0097623785 -0.0054114295 -0.0525026540 0.0130466147 0.0165642131 0.0041666172 -0.0208160867 -0.0085638416 -0.0284084708 -0.0034043178 0.0865337704 0.1602194565 0.0230970613 -0.0213443867 0.0270015084 0.0006233571 0.0012929649 -0.0064478902 0.0130118188 -0.0164458204 0.0110197555 -0.0319587372 0.0324979014 0.0495504613 0.0323967064 -0.0200555622 0.0117931626 0.0079234566 -0.1236827652 -0.0071241033 -0.0588404168 0.0987179678 -0.0610146012 0.0728271678 -0.0466167830 0.0000223541 -0.0288567503 0.0514909035 -0.0723436335 -0.1277650627 0.0277210453 0.0616229043 -0.0329663687 -0.0491548873 0.0761915954 -0.0080131282 0.0040663345 0.0170378057 -0.0204854018 0.0019161843 0.0096910392 0.0101950046 0.0043455928 -0.0284368310 -0.0035073736 -0.0020469795 0.0129664363 -0.0199285536 -0.0130603759 0.0021319497 0.0179903373 -0.0000331513 0.0039233684 0.0176089631 0.0430416412 -0.0202010650 0.0126123108 -0.0442408904 0.0247136339 -0.0219561875 -0.0126655442 0.0121712748 0.0394454334 0.0209431482 0.0502715554 -0.0304043389 -0.0580564641 0.0211410896 -0.0441736090 -0.0397735614 0.0022278455 -0.0866810357 -0.0064854378 0.0053638401 0.0175112764 0.0027131581 -0.0092348121 -0.0141885431 0.0065994248 0.0039042092 0.0220507651 0.0131061983 -0.0082755934 0.0121834740 0.0132240801 0.0004593126 -0.0104629533 0.0063384187 0.0080340319 0.0035872900 -0.0008286110 0.0012229863 0.0260736128 0.0106017946 -0.0108007256 0.0108642577 0.0357321128 -0.0023744546 -0.0190979907 0.0118160072 0.0093474982 0.0034306771 -0.0250335626 -0.0001003357 -0.0213478276 0.0045643561 -0.0003219151 0.0602306864 0.0195158205 -0.0102255964 0.0861367544 -0.0275243864 0.0974944040 -0.0389836774 0.1041559338 -0.0392856710 0.0012808762 0.0031083987 -0.0052082654 0.0036481940 0.0020479183 -0.0033938314 0.0021825572 0.0033363129 0.0013033341 -0.0025456559 -0.0004474744 -0.0004586056 0.0000916858 -0.0004051781 0.0051303862 -0.0018777590 -0.0028348930 0.0023435192 -0.0000741893 0.0002854031 0.0007332435 0.0060623914 0.0024414836 -0.0008436948 -0.0012598509 0.0002216118 0.0010106854 -0.0052667595 -0.0026210818 0.0047492436 0.0004875211 0.0025138161 0.0004559293 0.0048861264 0.0008410963 0.0082719574 0.0107738362 0.0069458953 0.0137279801 0.0005661283 -0.0170323965 -0.0052223289 -0.0072913537 0.0075702627 -0.0053496442 -0.0005182845 -0.0007117837 -0.0019301630 -0.0009469926 0.0021750773 0.0001501311 -0.0011719713 0.0030256940 0.0017595966 -0.0047487894 0.0032230905 0.0038835447 -0.0028115627 -0.0067915039 -0.0018735097 -0.0040433858 0.0029330032 0.0036873926 -0.0139468785 -0.0708779134 -0.0136590634 0.0093465486 -0.0621998071 -0.0590061868 0.0207273528 -0.0063335512 -0.0405529554 0.0040104961 -0.0190395606 0.0053156669 0.0241871511 -0.0148202811 -0.0453252576 -0.0072968456 -0.0634015844 -0.0564989353 -0.0076920833 -0.0512058247 -0.0775520681 0.0245398619 0.0344587134 -0.0644164864 -0.0014307745 0.0275023174 0.0572880647 0.0671735348 0.0100204064 -0.0528600723 0.0115802794 -0.0763887496 -0.0712341442 0.0145749446 0.0072233372 -0.0311873205 0.0487637940 -0.0554514964 -0.0161093535 -0.0132151799 0.0545366018 -0.0309449039 0.0503945123 -0.0422610260 -0.0097043213 0.0247536944 0.0162584454 -0.0241395197 0.0449818556 -0.0713317394 -0.0058373855 0.0976282275 -0.1608995134 0.0144355880 -0.0377081618 0.0353844697 0.0237699083 0.1171134211 -0.1524229034 0.0207811175 0.0717510827 -0.0712175262 0.0014037423 -0.0947595973 0.0421277221 0.0281002482 0.0598229152 0.0025308016 0.0186086261 0.0320443156 0.0207581230 0.0398307496 -0.0687647620 -0.0349685968 -0.0022906394 -0.0194163487 -0.0559670084 -0.1426351645 -0.0431108911 -0.0696910850 -0.1669965854 0.0278209680 0.0457965815 0.1223498524 -0.0038601820 -0.0270566875 -0.0783252705 0.0764443261 0.1755217626 0.4479128241 0.0087040474 -0.0049521695 -0.0118272172 0.0169233867 0.0485290090 0.1164125230 -0.0100906229 -0.0091600359 -0.0343948720 0.0999052122 0.1543794061 0.4010214222 0.0040875165 0.0242026938 0.0858787398 -0.0133315371 0.0208653896 0.0075677014 0.0348693581 -0.0132456433 -0.0282522576 -0.0123768558 0.0186420487 0.0154390021 0.0338101521 -0.0185700041 -0.0145595767 -0.0134299878 0.0220341036 0.0187639998 0.0778091518 -0.0463290816 -0.0319784317 0.0025311512 -0.0037234549 -0.0125351195 -0.0292415839 0.0066735032 0.0142436204 -0.0279789585 0.0080400542 -0.0022784887 -0.0822673069 0.0247882348 0.0462407882 0.0012468282 0.0041100961 -0.0043829875 0.0005532672 0.0052532854 -0.0052491625 0.0021022096 0.0064919038 -0.0063056025 -0.0031648140 0.0023161321 -0.0048840548 0.0048967606 -0.0006574818 0.0021257805 -0.0053252768 -0.0082725509 0.0067305580 0.0108950726 -0.0016550517 0.0070957942 0.0077676257 0.0005941393 -0.0005826948 0.0009755191 0.0059242898 0.0365561622 -0.0201682464 0.0059939499 -0.0180251306 -0.0141189859 0.0101798950 -0.0066759695 0.0176142289 -0.0033456659 0.0063629132 0.0266467874 0.0015358783 -0.0015013367 0.0173676548 -0.0104100855 -0.0329827596 -0.0000054246 -0.0047016682 -0.0049654924 0.0040145434 -0.0018746838 -0.0178591836 0.0060929630 0.0051414957 -0.0186617412 0.0030502103 -0.0113019921 -0.0334961759 -0.0175311994 -0.0224132012 -0.0146306684 0.0030921414 0.0350840056 -0.0522661450 -0.0008336326 0.0087626985 0.0224276700 -0.0148373574 -0.0172246355 -0.0112455543 0.0172138021 0.0098352477 0.0219739967 0.1759105586 0.0805897646 0.0916421689 0.1222017229 0.0632477365 -0.0916964550 0.1242302620 0.0438471190 -0.0656094803 -0.1540313855 0.0510904906 0.1191087295 -0.0251135886 0.0474869313 0.0219562091 0.1258442153 0.0912747356 -0.0337013396 -0.0492705670 -0.0088976562 0.0105624817 -0.1454926353 -0.1154649282 0.0875034234 -0.0659955200 0.2995973418 0.0590388610 0.1584474192 0.0780978408 -0.0685401798 -0.0622853993 -0.2136729133 -0.0943855268 0.0071373528 0.1928126020 0.0605578002 -0.0227359695 0.1904424614 0.0029438868 0.0210328730 0.1648886499 -0.0821763581 -0.0278928736 0.0549154101 0.1145568906 0.0961598833 -0.1246975653 0.0032456048 -0.0650868483 -0.0692431254 0.0157111906 0.0385500182 -0.0183418730 -0.0248078667 0.0618620122 -0.0271796502 -0.0762739427 -0.0367521929 -0.0600969236 -0.0374279148 -0.0346525393 -0.0957460001 -0.0872363181 -0.0011955586 -0.1062775229 -0.1122277029 -0.0131566525 0.0079386626 -0.1301781546 -0.0660205150 0.0592130116 -0.1065416518 0.1210263798 -0.1247593284 0.0376007684 0.0295137770 -0.2191428478 -0.1006634607 0.0339015902 -0.3012846237 -0.0848210020 -0.0193672549 0.0329629480 -0.0020853080 -0.0146159685 0.0309043146 -0.0169432984 -0.0022641903 0.0087144860 -0.0192737384 0.0154888129 -0.0099218639 -0.0002890400 -0.0043875797 -0.0012510850 0.0005332005 0.0000214954 0.0019685413 -0.0009893887 -0.0028214876 0.0012002636 -0.0012648704 -0.0003725749 -0.0004090173 -0.0006442792 0.0022943210 -0.0097909765 -0.0001108656 0.0035210842 -0.0126306719 -0.0096874456 -0.0026599810 -0.0017668980 0.0011404411 0.0009053284 -0.0073606767 0.0079255658 -0.0114561182 0.0028594872 -0.0055574954 0.0199241251 0.0176535553 0.0082234909 0.0026126339 -0.0248633560 -0.0166320328 -0.0219263794 0.0087208358 -0.0021315908 -0.0008183822 0.0001125948 0.0029122985 -0.0004496901 -0.0008235087 0.0022310692 -0.0013857775 -0.0046975065 -0.0027043276 0.0068870547 -0.0137891913 -0.0110726928 0.0030418001 -0.0040096323 -0.0110449539 0.0012405765 -0.0070496723 -0.0073473017 -0.0309831442 -0.0501906969 0.0409234677 0.0047760932 -0.0029060045 -0.0183321509 0.0095571646 0.0103828894 -0.0318059948 -0.0149177490 -0.0500105089 0.0296120895 0.0002076704 0.0181768462 -0.0315522983 -0.0120841040 -0.0032725934 -0.0103829382 0.0287306888 0.0419161118 -0.0603844517 0.0378053423 0.0700219531 -0.0899152398 0.0032913690 -0.0086372953 0.0325357880 0.0212963037 0.0850270125 -0.0900312053 0.0088187956 0.0467042260 -0.0517456876 -0.0040117289 0.0007589267 0.0049262565 0.0091412335 -0.0199829047 -0.0019640171 -0.0064801809 0.0210406970 -0.0122766647 0.0132085560 -0.0105470288 -0.0000733713 0.0009291262 0.0024145187 0.0075440750 0.0027332158 -0.0325502767 0.0164484254 0.0229314936 -0.0627899221 0.0029704028 -0.0070340097 0.0110733376 -0.0010891345 0.0410478097 -0.0454045677 0.0090036289 0.0224859598 -0.0266004827 0.0228665303 -0.0216069460 0.0204029525 0.0080021086 0.0327189005 0.0055097246 0.0003686177 0.0045180083 -0.0010481525 0.0066629355 -0.0066960403 -0.0058017688 0.0020248507 -0.0151132315 -0.0024336836 -0.0228014797 0.0104389846 0.0049981694 0.0053543312 -0.0088896351 -0.0053085684 0.0012522930 -0.0076300294 -0.0034695986 0.0169972451 0.0057292468 0.0022196121 0.0211993081 -0.0065081763 0.0149725006 0.0440795239 0.0092275824 0.0005265567 0.0149876329 0.0042275325 -0.0160899149 -0.0151171810 0.0006819502 0.0059256344 0.0286540565 0.0045903255 -0.0176387932 -0.0373581624 -0.0381639849 0.0155723418 0.0245033943 -0.0210323160 0.0086490540 0.0159991950 0.0162098948 -0.0109599937 -0.0031158530 0.0069830097 0.0042950495 0.0062359133 0.0764431032 -0.0392111289 -0.0385581529 0.0409259152 -0.0079755153 -0.0219638746 0.0282677374 -0.0068650308 -0.0088228171 -0.0100412720 0.0143088026 0.0194926755 0.0873617399 -0.0363156360 -0.0421116193 -0.0037017733 0.0087944434 0.0150558992 0.0219210864 0.0070083605 0.0043559985 0.0457838409 -0.0189752841 0.0237748406 -0.0016728281 -0.0422729916 0.0109303411 0.0728873670 0.0401704549 0.0200164675 -0.0262641449 0.0057906309 0.0114144893 -0.0565881766 0.0236805756 0.0407479888 0.0077272668 -0.0290444042 0.0056782407 -0.0285191658 -0.0164632872 0.0427027988 0.0071487167 0.0099950260 0.0144105380 -0.0125656253 0.0174272598 -0.0618065651 -0.0223244087 0.0304384650 -0.0312654794 0.0531661974 -0.0111644886 0.0045206432 0.0818247031 0.0004002505 -0.0485256443 0.0595002651 -0.0353630468 -0.1143094810 0.0117292155 -0.0207491746 -0.0292295230 0.0135686193 -0.0118787901 -0.0603316522 0.0364931115 0.0000764771 -0.0755837958 0.0060258857 -0.0405995542 -0.1091624469 -0.0711052229 -0.0396979503 -0.0203958437 0.0377665110 0.0861220427 -0.0692443016 -0.0220730976 0.0583538226 0.0641380519 -0.0289904556 -0.0850164678 -0.0320821600 0.0976561220 -0.0629876684 0.0119209273 -0.0461352245 0.0196029782 -0.1511740838 -0.0245997306 -0.0233768140 0.0401460615 -0.0259044832 -0.0136408318 0.0258435512 0.0550295080 -0.0351783955 -0.0067051788 0.0037293424 -0.0066677460 -0.0251458708 -0.0348123584 -0.0240982854 0.0061307674 -0.0033485469 -0.0051010155 -0.0038628630 0.0359529496 0.0092954170 -0.0115560571 0.0021193956 -0.0592819919 -0.0516768008 -0.0470910801 -0.0179552884 -0.0082532989 -0.0263788328 0.0573663534 -0.0189474164 0.0276317596 -0.0199592593 -0.0495312045 0.0619816298 -0.0359597586 -0.0002899910 0.0939815853 -0.0656464943 0.0414998683 -0.0082687813 -0.0256954404 -0.0400975200 -0.0253227231 0.0447256299 -0.0062584272 0.0035923386 0.0143354970 0.0030944686 -0.0290203163 -0.0074724059 0.0090649863 -0.0135977531 0.0028020019 0.0259115309 0.0111385157 0.0258651068 0.0141821047 -0.0113643371 0.0273133589 0.0531483692 -0.0099360772 0.0032658573 0.0501800901 0.0252688588 -0.0161203458 0.0504479568 0.0240525302 0.0021140732 0.0458250164 -0.0273279014 0.0475449906 -0.0168417349 -0.0685267040 0.0701052223 0.0371008538 -0.0783208138 0.1214039058 0.0249372982 -0.0651871186 0.1000452467 -0.0011867480 -0.0017071527 -0.0110127207 0.0082159497 -0.0070305499 -0.0033238802 0.0070914046 -0.0083619425 0.0014502769 -0.0008919395 0.0079423822 0.0044945203 -0.0016375380 0.0035307825 -0.0000568821 0.0008708245 0.0072108853 0.0001908269 -0.0035387305 0.0012072274 0.0020416963 0.0009955173 -0.0113342314 -0.0026471276 0.0018796845 0.0018577836 0.0015172991 0.0002890674 -0.0012199154 -0.0061053459 0.0035363059 0.0052881349 -0.0095291140 0.0083043085 -0.0060039636 0.0025177152 -0.0017453760 -0.0052278454 -0.0084297544 0.0025046579 0.0014097663 0.0210599456 -0.0010073883 -0.0015375174 0.0033707300 -0.0038275178 -0.0016211181 0.0000125904 0.0040263562 -0.0010122400 0.0053616028 0.0089466499 -0.0011541847 -0.0067476633 -0.0034580330 0.0070319935 -0.0036231699 -0.0046350076 0.0050330962 0.0126223377 0.0065464508 0.0078613701 -0.0043502544 -0.0053258911 -0.0615584733 -0.0927906786 0.0947967742 0.0033534437 0.0006236196 -0.0129706638 0.0157429006 0.0272286486 -0.0584850245 -0.0321220260 -0.0978267740 0.0600230577 -0.0038435495 0.0440767728 -0.0585166618 -0.0236252611 0.0032743396 -0.0028392762 0.0745441231 0.1061953690 -0.1082547040 0.0736418027 0.1636875676 -0.1848785246 0.0033265758 -0.0244352932 0.0519370306 0.0325187501 0.1867485520 -0.1867117572 0.0180230175 0.1187101786 -0.0914298437 -0.0203636038 0.0018877402 0.0228913826 0.0204414512 -0.0588679563 -0.0059817627 -0.0234866182 0.0694920038 -0.0402740282 0.0383479987 -0.0363738547 -0.0004397933 -0.0056870136 0.0057058919 0.0303843438 0.0033237160 -0.1122630872 0.0624845905 0.0622402461 -0.2013702395 0.0052866617 -0.0147909768 0.0343562094 -0.0048063525 0.1310341705 -0.1484131698 0.0283359292 0.0654599991 -0.0843578804 0.0826843359 -0.0217932698 0.0323762416 0.0102408379 0.0535187607 0.0074009837 -0.0038296532 0.0130503043 -0.0018888206 0.0177262610 -0.0138259627 -0.0160894854 0.0070207611 -0.0324525602 0.0111733491 0.0173017753 0.0426187831 0.0211966894 0.0634491533 -0.0513180875 -0.0237438730 -0.0259663275 -0.0447222233 -0.0013327489 0.0557055923 -0.0430804019 -0.0534102683 -0.0976341542 -0.0539595730 0.0281545489 0.0668043351 0.0169124404 -0.0319087037 -0.0011481429 0.0063792533 -0.0291713625 -0.0104992893 -0.0286558783 -0.0550702435 -0.0649960361 0.0160835646 -0.0228387527 -0.0978666366 -0.1193706065 0.0440950199 0.0717397606 -0.0885204620 0.0366540888 0.0659506093 0.0554295707 -0.0445530060 -0.0127991665 0.0078918143 0.0204357021 0.0308041111 0.2587066692 -0.1393166470 -0.1307385590 0.1036697864 -0.0083120512 -0.0581153212 0.0867705683 -0.0154387328 -0.0206131636 -0.0144635867 0.0407071930 0.0594159785 0.2947808536 -0.1192429071 -0.1377050901 0.0391980498 0.0063664459 0.0238613507 -0.0114883186 -0.0084954314 0.0029933886 -0.0166706782 -0.0022150594 -0.0018035269 -0.0068364009 0.0002989036 0.0052526895 -0.0167261840 -0.0161523513 -0.0020903360 0.0009766901 0.0049543073 -0.0061069191 0.0215964305 0.0011080680 -0.0224145523 -0.0206014853 0.0217459946 -0.0078953948 0.0065132013 0.0094930927 -0.0134139109 0.0297674751 0.0681276423 0.0268030773 0.0965312085 0.1282788432 0.1968358535 0.0281443289 0.0733888799 0.0446326822 0.0293175394 0.0582269664 0.0654746316 0.0550243473 0.0359233239 -0.0500851684 -0.0515304877 0.0654620056 -0.0508448374 -0.0704848580 0.0562398580 0.0333989418 -0.0527200938 0.0893925862 -0.0121442982 -0.0265941286 0.0600105117 -0.0370777657 -0.1693542228 0.1312808349 0.0111760084 -0.0158409166 0.0275498048 -0.0710382497 0.0897214323 -0.0307498598 -0.0377422939 -0.0373067474 -0.0199234343 0.0375628055 -0.0508343742 -0.0408328106 0.0227726317 0.1187233340 -0.0131229055 0.0188175462 -0.0029212289 0.0208763213 -0.0828162941 0.0002926511 0.0051513971 0.0040507275 -0.0025505815 0.0012517104 0.0071296260 0.0026626044 -0.0159397760 0.0050544938 -0.0029133322 0.0049385830 -0.0002318425 -0.0055391276 -0.0098924057 -0.0021270981 -0.0115282354 -0.0131956877 -0.0000262327 -0.0060884006 -0.0044213794 0.0017910047 -0.0040951372 0.0052497778 -0.0025225083 -0.0002526104 -0.0115668635 -0.0151276185 -0.0204705017 -0.0081828592 -0.0135507668 0.0222093718 0.0106670572 -0.0191339919 0.0393314552 0.0045368704 0.0032477378 0.0685530242 -0.0202874935 0.0203925736 -0.0140134083 -0.0062240825 -0.0216000076 -0.0054436814 0.0118284523 -0.0111387937 -0.0072342543 -0.0013875491 0.0025502585 -0.0136001393 -0.0059749271 0.0016365893 0.0030306698 -0.0013865900 0.0118094371 0.0050126156 0.0065516182 0.0089546235 -0.0081421979 0.0015969308 0.0301049371 -0.0015473423 -0.0127208893 0.0273397439 0.0229506758 -0.0103987194 0.0313076133 0.0146925258 0.0065484762 0.0327844579 -0.0062252890 0.0135945077 -0.0172924860 -0.0331886287 0.0174635711 0.0075551963 -0.0418240363 0.0408120090 -0.0153920508 0.0525391338 -0.0999755130 0.0115720839 0.0012133289 -0.0028576470 0.0055897969 -0.0005712955 -0.0007567122 0.0028569076 -0.0008094225 -0.0010906237 -0.0013748081 -0.0004622249 0.0000980004 0.0004919138 0.0016990614 0.0002033586 -0.0036507183 0.0000684728 0.0012630715 0.0001325178 -0.0002531590 -0.0009249795 -0.0007142774 -0.0017109512 -0.0013233453 -0.0004570486 0.0007927300 -0.0005957661 -0.0005449499 0.0063359361 0.0010365673 -0.0024772387 -0.0010810088 -0.0006662993 0.0060140476 -0.0027805336 -0.0046805130 -0.0092922159 -0.0125449489 -0.0081217231 -0.0064055008 -0.0033457182 0.0176007132 0.0039171408 0.0066795910 -0.0025117356 0.0017076425 0.0008310946 -0.0001879353 -0.0016992724 0.0004768182 -0.0020572137 -0.0034309230 0.0007592277 0.0014925924 0.0005066205 0.0019283290 -0.0018592410 -0.0017322562 0.0014896544 0.0015291246 0.0006609109 0.0020088576 -0.0024247388 -0.0017391608 -0.0048529084 -0.0211448246 0.0098534921 0.0202514539 -0.0441367026 -0.0206048154 0.0206054198 -0.0254413070 -0.0570169727 -0.0035632841 -0.0239767985 -0.0236741270 -0.0133967789 -0.0140453284 -0.0556582419 -0.0248519572 -0.0245211781 -0.0161696022 0.0529745456 -0.0367550031 -0.0191965217 0.0511880242 -0.0056849895 -0.0994079421 0.0112642364 0.0345068291 0.0631639923 -0.0302454659 -0.0020261288 -0.0733592036 -0.0396256103 -0.0135637916 -0.0073051423 0.0232364397 -0.0312291564 0.0202058909 -0.0518875501 0.0816425039 0.0389615347 -0.0068780621 -0.0401793780 0.0498976153 -0.0864877355 0.0490434120 0.0263501667 -0.0199200127 -0.0528268587 0.0065617675 0.0190451969 0.0546443155 -0.0094695455 -0.0854921808 0.2230679898 0.0364075093 0.0492800524 -0.0421887419 -0.0482320325 -0.1977630296 0.1643388593 -0.0013941277 -0.0901160898 0.0118549473 -0.0510647062 -0.0882228264 0.0449013191 0.0382414463 0.0836993915 -0.0015629746 0.0228745443 -0.0480720962 -0.0400669572 -0.0628714451 0.1039247262 0.0441306355 0.0008859791 -0.0458713297 -0.0749901903 -0.1633147838 0.0116593754 -0.0304608898 -0.0330543685 -0.0462046340 -0.0030145724 0.0064248027 -0.0477854661 0.0132662249 0.0557879800 -0.0150613601 0.0781480923 0.2120214069 -0.0211410978 0.1012513601 0.2504140268 0.0229081161 0.0006628038 0.1057505757 -0.0300426624 -0.0417775877 -0.0876663941 0.0611241469 0.0583374191 0.2582900408 -0.0136799363 -0.0217064271 -0.1384635047 0.0463515707 -0.0592671826 -0.0392923417 0.1146909271 -0.0670061524 -0.0461800635 -0.0642050271 -0.0135045623 0.0308148998 0.0412313848 -0.0237163768 -0.0256138016 -0.2310201461 0.0590364798 0.1173777064 -0.0088525931 0.0248560472 -0.0333828205 0.0101758960 0.0070450741 0.0506861757 0.0230112162 0.0113312029 0.0396057117 -0.1438135948 0.0954113474 0.1619954061 -0.0810678722 0.0941785211 0.1139600787 -0.0001387379 -0.0021134404 0.0010161915 0.0020260789 -0.0000091922 -0.0007892960 -0.0004718328 -0.0027417221 0.0001307788 -0.0011201891 -0.0042328005 -0.0004630269 -0.0040377262 -0.0013411190 -0.0013999438 0.0051840080 0.0025537327 -0.0067962358 -0.0122086063 0.0021311049 -0.0047084959 -0.0084530499 0.0008800155 -0.0030725669 0.0010560909 0.0007755787 -0.0092149557 0.0075130449 0.0029674016 0.0020317167 0.0025710036 0.0014872041 -0.0025567800 -0.0022732936 0.0011373563 -0.0023267978 0.0003894002 0.0006817489 -0.0110818101 -0.0023295937 0.0008538231 -0.0092072987 -0.0093538640 0.0034266592 -0.0002816652 -0.0038760727 0.0083524733 -0.0004949268 -0.0025192237 0.0051911475 -0.0029586174 -0.0166833311 0.0137299177 0.0033787379 -0.0031515465 -0.0008710044 -0.0073348518 0.0012787449 0.0047297544 0.0065020488 0.0000202567 0.0028064955 0.0057571629 -0.0013223267 -0.0058361239 0.0000368108 0.0148293373 -0.0125728826 -0.0004678209 0.1987132288 -0.1358451858 0.2487219918 -0.0468855625 -0.0071881637 -0.0324559682 -0.0290791740 -0.0254693029 0.0089630077 0.0606306638 -0.0265178082 0.0035328879 -0.0081627990 -0.0155026954 -0.0180544090 -0.0176680610 -0.0493691622 0.0196340888 0.0064862955 0.0003449869 -0.0360710096 0.0712714451 0.0133566354 0.0343613851 -0.0544129846 -0.0494457005 -0.1226763055 -0.0376082967 -0.0405669511 0.0219491175 -0.0376335690 0.0769269656 -0.0809809901 -0.0136470845 -0.0245501461 -0.0284602013 -0.0807897981 0.0152315189 -0.1173575231 -0.1663079409 0.0927873455 -0.2179807563 0.1056735101 -0.0402041617 0.2424752356 0.0575674271 -0.0157835937 0.1529905116 0.0065844222 0.0061398378 0.0273304562 0.0150548507 -0.0147078846 0.0350767273 -0.0579014856 0.0035368875 -0.1142008119 -0.0535906880 0.0228782000 -0.1023337758 -0.0974763918 0.0437270451 -0.2057014934 -0.1056452003 0.0293996922 -0.2263030640 -0.1755286553 0.0337073069 -0.3949394596 -0.1713310373 0.0600736779 -0.3856402074 0.0955921641 -0.0182100401 0.2147240869 -0.0269909783 0.0749716728 0.0044278595 -0.0288278257 0.1174893468 0.0177078149 0.0008304605 -0.0017579181 -0.0003425949 -0.0129698130 0.0179739319 -0.0219933064 0.0144938411 0.0055978014 -0.0135483921 0.0087996125 0.0170594149 0.0131909186 -0.0075171757 -0.0033739733 0.0008273893 -0.0022089365 0.0016810075 -0.0015637425 -0.0024176105 -0.0003283488 0.0014901387 0.0000183627 -0.0027306907 -0.0029147582 0.0235604715 0.0067922383 -0.0072420141 -0.0007411611 -0.0032363508 -0.0029406258 0.0035910091 -0.0004239002 0.0014352696 -0.0057957895 0.0075517801 0.0017649777 -0.0018990176 0.0012457462 -0.0016535723 0.0166034200 0.0130231795 0.0065874044 0.0044903920 -0.0277327296 -0.0052134137 -0.0146468869 0.0096026565 -0.0027066273 -0.0055741413 -0.0084982727 -0.0050705992 -0.0037826403 0.0031664606 0.0053493735 -0.0055791287 -0.0077601530 -0.0062574719 -0.0122946039 0.0085066173 0.0084317161 -0.0061491959 -0.0261420324 -0.0132458232 -0.0098819930 0.0080645084 0.0055956802 -0.0019438633 -0.0031554717 0.0089980246 0.0018412795 -0.0030160937 0.0043385229 0.0021728463 -0.0022509208 -0.0101810833 -0.0020483977 -0.0071983166 -0.0024402839 -0.0022603445 0.0006208802 -0.0101592395 -0.0024144035 0.0001820374 0.0037647860 0.0144643227 0.0037228251 0.0008155855 0.0112456496 0.0061085289 -0.0240534915 0.0022618616 0.0022772798 0.0100511306 -0.0068660559 0.0084116541 -0.0195555120 -0.0050943681 0.0094776435 0.0024835570 0.0014193822 -0.0022338642 0.0005994943 -0.0010535474 0.0017506287 0.0013015425 -0.0006366848 0.0002598838 0.0009299405 -0.0026490505 0.0018836747 -0.0000395489 0.0002712163 -0.0030782958 -0.0000297349 0.0009488205 0.0000985807 -0.0002296280 -0.0015534266 0.0061032199 0.0018887225 0.0018261758 -0.0010331476 -0.0007338232 -0.0059976925 0.0053958861 -0.0009032865 -0.0011762242 -0.0025062326 -0.0014383131 -0.0083516646 0.0043599199 0.0042303134 0.0092237857 0.0010516325 0.0024942259 -0.0018931933 -0.0010734701 -0.0016973081 0.0026853859 0.0013731489 -0.0004529667 0.0009292007 0.0000720094 0.0065943525 0.0014536411 0.0000156098 0.0068702917 -0.0021946531 -0.0021577525 -0.0031407823 -0.0003321102 0.0021700898 0.0023409805 -0.0064816438 -0.0070669920 -0.0156096831 -0.0017168492 0.0020360253 -0.0019284964 0.0008818858 -0.0029252192 -0.0031394604 0.0007994362 0.0012220533 0.0001900290 -0.0002152705 -0.0068839968 -0.0133953309 0.0009543894 0.0007512829 -0.0064989784 -0.0027622079 -0.0019498007 -0.0021041646 0.0122544534 -0.0055683251 -0.0039745758 -0.0078977821 -0.0022454493 0.0046517749 0.0071931015 -0.0051190000 -0.0028045004 -0.0164380023 0.0028223019 0.0117869872 0.0102708571 -0.0027881621 -0.0109008156 0.0063083446 -0.0000564540 0.0041695021 0.0002016838 0.0029733282 0.0104412989 -0.0050201028 0.0054910693 0.0106573235 -0.0133307468 0.0128315693 0.0199050454 0.0078756449 -0.0006368284 -0.0019959739 0.0123057224 -0.0076022360 0.0033588136 -0.0034229160 -0.0255206448 0.0104605879 0.0385580585 0.0079559856 -0.0000356586 -0.0133519919 0.0069511518 0.0100103307 -0.0345086193 0.0266953549 0.0334908885 0.0118386344 -0.0163464875 0.0085983707 -0.0006978522 -0.0111023605 0.0314757142 -0.0163251797 -0.0400865237 -0.0672260314 -0.0248454210 -0.0237663852 -0.0379266718 -0.0079421265 -0.0202022886 -0.0254447196 -0.0535502680 -0.0162429392 -0.0325050573 -0.0295835429 -0.0072106802 -0.0456019678 -0.0294317911 -0.0363275333 -0.0383150612 -0.1171524105 0.0201068434 0.0143391150 -0.0302733699 0.0844181465 0.0673299185 -0.0387772001 0.0203597684 0.0489559774 -0.1366851146 0.1747870489 0.1734812491 0.0178603879 -0.0469780638 -0.0790975378 -0.0468046332 0.0633807849 0.0493894603 0.0547332301 0.0348229883 0.0355043059 -0.0076754844 0.0156695332 -0.0673239928 -0.0410754301 -0.0559221021 0.0298541467 -0.0123519693 0.0092463236 -0.0511600935 0.0031152128 0.0125459680 0.0023862917 -0.0002599057 0.0089585711 0.0046075197 -0.0008070791 -0.0071153677 0.0028975343 -0.0034865049 0.0080775388 0.0029943763 -0.0015773835 -0.0020308503 -0.0002467469 -0.0069831509 -0.0069091501 0.0012281774 -0.0036147593 0.0044526275 0.0027368910 -0.0030189583 0.0117257678 0.0063175392 0.0049372812 -0.0044891425 -0.0089812444 -0.0112137757 -0.0063622180 -0.0055484835 0.0064051952 0.0005995969 -0.0049442294 0.0198662017 -0.0016864539 0.0092806038 0.0350707930 -0.0153667977 0.0262716557 -0.0084119917 -0.0015501690 -0.0176190194 -0.0052025613 0.0060079329 -0.0096348417 -0.0021568029 0.0002572013 -0.0012230881 -0.0058395000 -0.0020649091 -0.0014852714 0.0021293996 -0.0012629201 0.0086408905 0.0042092213 0.0020964875 0.0074987490 0.0018252691 -0.0000989592 0.0196411505 0.0040427127 -0.0074044434 0.0196422585 0.0137089931 -0.0050932889 0.0293625452 0.0131214585 -0.0011021368 0.0291553974 -0.0058711005 0.0067331654 -0.0126508147 0.0044614655 -0.0011111604 -0.0088320146 0.0177755282 -0.0284683915 0.0652593002 0.0317071836 -0.0419928971 -0.0014367688 -0.0025942708 0.0015827056 0.0022423207 -0.0018976328 0.0012759333 -0.0007836731 0.0009992003 -0.0008678069 -0.0014745885 0.0021246339 0.0020406271 -0.0020102629 0.0000494601 0.0012462538 0.0047937706 0.0024868783 -0.0030780080 0.0004879544 0.0005618200 0.0008083802 0.0000100239 -0.0030852240 -0.0026015404 0.0000620671 0.0012530851 -0.0026793963 -0.0019352591 -0.0074843901 -0.0008046089 0.0032549491 0.0030039132 -0.0031656664 0.0014270384 -0.0017892404 0.0049007692 0.0066258130 0.0113427152 0.0039352975 0.0149520545 0.0032551289 -0.0097161621 0.0002024299 -0.0090929990 0.0062711997 -0.0043210520 -0.0007433422 0.0003206845 0.0030972313 -0.0006408961 0.0025123335 0.0049742796 -0.0011762957 -0.0052161574 -0.0029918666 0.0033147931 -0.0042590823 -0.0034407139 0.0023377413 0.0022917009 0.0002298526 0.0029162240 -0.0039069999 -0.0033548660 -0.0448993054 -0.0786914195 0.0930967950 -0.0013223319 0.0100132870 0.0261413341 0.0214089619 0.0460180245 -0.0279802759 -0.0187371946 -0.0819236213 0.0688817721 0.0305821089 0.0489328723 -0.0295143516 0.0140906129 -0.0018630913 0.0338808308 0.0521105504 0.1081802018 -0.0654131572 0.0742227657 0.1783108427 -0.1473388478 -0.0156816131 -0.0453531528 0.0042248286 0.0849474063 0.2023543022 -0.1612680130 0.0660312004 0.1067852812 -0.0611271913 0.0085264012 -0.0008101002 -0.0318575596 0.0059676769 0.0131997448 -0.0264442353 0.0262533480 -0.0462708797 0.0041224269 0.0100590805 0.0091054463 -0.0225458346 0.0182831841 0.0112256259 -0.0290860791 -0.0308569510 0.0722050140 -0.0557991749 -0.0281747895 0.0906930178 -0.0459514390 -0.0126811995 -0.0054388890 0.0363966473 -0.0225558974 0.0795313042 -0.0431389507 -0.0231869173 0.0838321557 -0.0534050148 0.0224702949 0.0004263557 -0.0190585345 -0.0290471935 0.0152528730 -0.0136424449 0.0226120589 0.0281874822 0.0234909500 -0.0476858196 -0.0105315297 -0.0044280466 0.0281031573 0.0345733325 0.0970727141 -0.0127207954 0.0081170034 0.0371608952 0.0348442131 -0.0157945008 -0.0129597452 0.0568959796 0.0061669717 -0.0249676601 0.0010294967 -0.0710862651 -0.1545580693 0.0367335688 -0.0294916304 -0.1326960813 -0.0019893730 0.0038113038 -0.0746147927 0.0360440090 0.0312392075 0.0350306025 -0.0139480267 -0.0371388593 -0.1794902537 0.0181427755 0.0046269915 0.0470976140 -0.0167947156 0.0115072598 -0.0293071284 0.1870595843 -0.0575288599 -0.0872490162 -0.1081283565 0.0324107046 0.0547035819 0.0941715977 -0.0886532346 -0.0667927644 -0.2261509941 0.1113954381 0.1704571120 0.1639697132 -0.1087792395 -0.1326819600 0.0482211253 -0.0193961504 0.0100586513 -0.0532020469 0.0185824211 0.0950846001 -0.1479271352 0.0617988733 0.0904553341 -0.2680553478 0.1561431299 0.2399016034 -0.0007655833 -0.0013672833 0.0002097502 0.0039856606 -0.0009902512 -0.0004012143 -0.0033459418 -0.0064351303 -0.0002315310 0.0023792139 -0.0013552628 -0.0004621727 -0.0049585160 0.0014821291 0.0005453705 -0.0032628696 0.0053917835 0.0009989769 -0.0065036604 -0.0012160289 -0.0052550138 -0.0084536309 -0.0003998182 0.0039927423 -0.0179320248 -0.0206025695 -0.0144112244 -0.0156480402 0.1347564692 0.3144650098 -0.0216926470 0.0505680622 0.0979468972 0.0220349925 0.0536996078 0.1095258612 0.0192550171 0.0011412588 0.0103640446 0.0622828146 -0.0186238054 -0.0304415922 -0.0004971454 0.0241283669 0.0453872026 -0.0408072257 0.0127369788 0.0059615941 0.0469862705 -0.0273210614 -0.0461168555 -0.1468158337 0.0848486306 0.0816594183 -0.0491350321 -0.0517178523 0.0338409171 0.0092422742 0.0142690668 -0.0167997019 -0.0051247024 0.0337525499 0.0023907843 0.0172295262 -0.0241364600 -0.0099241217 -0.0109085311 -0.0121284256 -0.0125171275 0.0054737120 -0.0066870839 0.0133465552 -0.0008160030 -0.0018985520 0.0028638011 -0.0008188888 -0.0004759327 0.0008649065 0.0041490271 -0.0006641469 0.0000849953 0.0003993363 -0.0005086248 -0.0028693589 -0.0009412307 0.0000382183 0.0011687042 0.0011497752 0.0016806937 -0.0008941577 0.0042451342 0.0006348134 0.0007454379 -0.0000060491 -0.0039317054 -0.0050067005 -0.0022085112 0.0005913839 0.0018022919 -0.0004761565 0.0058580171 -0.0020316803 -0.0022920137 -0.0028899181 -0.0002402456 -0.0061688827 -0.0009344321 -0.0058774057 -0.0121458837 0.0042808353 -0.0106034706 0.0067352987 -0.0024155578 0.0134966125 0.0029646363 -0.0006377530 0.0080904091 0.0012403318 0.0003048507 0.0001541050 0.0008403443 -0.0003419518 0.0023369438 -0.0041079519 0.0012885808 -0.0079798561 -0.0014526105 0.0006398954 -0.0051941667 -0.0048690523 0.0025083666 -0.0139198405 -0.0061075496 0.0009424279 -0.0123352879 -0.0105459228 0.0032420576 -0.0219520282 -0.0073876067 0.0017217920 -0.0195475913 0.0042502624 -0.0014635077 0.0123158968 0.0005558988 0.0018532349 0.0007821088 0.0002414536 0.0000141971 -0.0104509680 -0.0219527664 0.0329473451 -0.0035616061 -0.0026076176 0.0009978364 -0.0010782540 0.0018988152 0.0008434670 -0.0015704528 0.0013579941 0.0026131124 0.0020264811 0.0003437129 0.0005155179 -0.0007170364 -0.0011354541 0.0017490968 0.0003331633 0.0000482611 -0.0012945450 0.0001339338 0.0003239208 -0.0000311381 -0.0005657722 0.0027717993 0.0002614631 -0.0010731552 0.0003483410 -0.0012900413 -0.0009343494 -0.0022581347 -0.0012860117 0.0016301792 -0.0005834004 0.0004067393 0.0004639955 -0.0032801251 0.0048464929 0.0016236848 0.0038922920 0.0016490007 0.0072184952 0.0002817596 -0.0014448593 0.0030096789 -0.0047565741 0.0033668161 -0.0025246013 -0.0011661043 -0.0009260040 0.0016489601 -0.0007616460 0.0013384943 0.0042041095 -0.0016210340 -0.0054535089 -0.0033559646 -0.0007829511 -0.0000733943 0.0002463057 -0.0001836220 -0.0033946779 -0.0019383932 -0.0006653229 -0.0000545654 0.0000350543 -0.0352665848 -0.0639634578 -0.0081200609 -0.0476183419 0.0468172335 -0.0181896370 -0.0138867196 0.0973179869 0.1251952545 0.0151155392 0.0098764545 0.1308229580 0.0999773008 0.0688159668 0.1105450683 0.0680880382 -0.0201373755 -0.0027515429 -0.1139092598 0.1222929113 -0.1232280062 -0.0903070996 0.2168608272 0.1496078773 -0.0456773681 -0.1021625207 -0.1348128475 0.2630867029 0.1625300034 0.0781251635 0.1840332942 -0.0303640099 -0.1110589625 -0.0005742013 -0.0022335639 0.0190155320 -0.0016412595 -0.0078230380 0.0178422151 -0.0231637133 0.0338150948 -0.0034046256 -0.0145781558 -0.0120696082 0.0146691854 -0.0219477401 -0.0108393494 0.0157436251 0.0244962113 -0.0583442162 0.0377797555 0.0262029526 -0.0606056286 0.0364710277 0.0119348030 0.0049253412 -0.0281081744 0.0070259303 -0.0659439699 0.0309594124 0.0018141981 -0.0665217716 0.0261343371 0.1802601453 -0.0953653075 -0.1013304936 -0.2222334415 0.0206631957 -0.0557002450 -0.0139520997 -0.0205529711 -0.0189116375 0.0397225794 0.0099722584 0.0042900178 -0.0432795679 -0.0488795315 -0.1637831296 -0.0021150945 -0.0122211474 -0.0600999178 -0.0006135298 -0.0153871135 0.0030232169 0.0102340889 -0.0035064470 0.0368920905 0.0572778770 0.0680076806 0.2141466426 0.0346067663 0.0879235802 0.2268258913 0.0293165461 0.0376242938 0.0784107561 0.0122133087 -0.0445616444 -0.0757923382 0.0576785884 0.1042100133 0.2551670462 0.0104710853 -0.0461296896 -0.0655083660 0.0154098764 -0.0023655219 0.0188899228 0.0138635504 -0.0243900466 -0.0300028410 0.0009539245 0.0242202710 0.0089389629 0.0260167412 0.0112393184 -0.0127955384 -0.0300371856 0.0264846603 0.0021177720 0.0430927576 -0.0121987550 0.0007839511 -0.0050936001 -0.0077883466 -0.0294417449 -0.0324305988 0.0141916568 -0.0244700893 -0.0130004679 0.0074259904 -0.0041516668 -0.0770742952 0.0196119981 0.0002566215 -0.0013169551 -0.0018419606 -0.0002595135 0.0011576436 -0.0017509508 -0.0004740249 -0.0031703138 -0.0055260918 0.0002655660 0.0016899684 -0.0017371835 -0.0007001637 -0.0024346311 0.0017289238 0.0009832482 -0.0037494879 0.0030986073 0.0023738250 -0.0006367284 0.0006878061 0.0012491368 0.0015503610 -0.0002198677 0.0027790645 0.0050529360 0.0231656340 0.0422291439 -0.0349478644 -0.1109047816 -0.3380184930 -0.0167795575 -0.0161877033 -0.0923371345 0.0189462541 -0.0137169007 -0.0538714115 0.0187806020 0.0521997007 0.0928281902 -0.0681166393 0.0736353538 0.0247878252 0.0189033274 0.0032539884 -0.0357954993 0.0125814371 -0.0007386971 -0.0619815325 -0.0751062347 0.0983872549 0.0082030365 0.1070539534 -0.1070063289 -0.1983526759 -0.0058846667 -0.0443860670 -0.0377534589 -0.0186392032 0.0654960767 -0.0552523515 0.0338694899 -0.0590370653 0.0152939721 -0.0341518814 0.0162815435 -0.0171118801 0.0159862803 0.0086283029 0.0482749576 0.0152261489 -0.0009175003 -0.0337440504 0.0103868820 0.0125784675 0.0046050989 -0.0005003759 0.0028786292 0.0088708103 -0.0006040077 -0.0115490761 0.0053563712 -0.0112441601 0.0082997796 0.0055163485 -0.0048565579 -0.0127221507 -0.0052882503 -0.0051577251 -0.0154329356 0.0004636754 -0.0053275113 0.0078526992 0.0043438769 -0.0161429292 0.0122244525 -0.0020180879 -0.0033013373 -0.0125480994 -0.0233041853 -0.0107540213 -0.0130821035 -0.0077206942 0.0090462663 0.0046990330 -0.0104279599 0.0175318423 0.0078180125 -0.0018521160 0.0293810059 -0.0021331795 0.0043022185 -0.0031505390 -0.0030836827 0.0024509116 0.0020149049 0.0023307775 0.0006525301 -0.0053408825 -0.0025810710 0.0022802372 -0.0058753632 -0.0035824371 0.0016348420 0.0001588336 -0.0001803567 -0.0015911962 -0.0002131258 0.0024495572 -0.0004916507 -0.0092350606 -0.0002460553 0.0041849752 -0.0051307586 -0.0098507139 0.0030055978 0.0040908178 -0.0026379566 -0.0028474256 -0.0003475809 0.0071316362 -0.0004329477 0.0037190290 0.0024964695 0.0026950194 0.0013695086 0.0086743917 -0.0068424250 0.0101341737 -0.0011234306 0.0526939435 0.0047665112 0.0255645480 -0.0523207589 -0.0000636101 0.0015783727 0.0009114296 -0.0012549906 0.0004035609 -0.0000608274 0.0003665371 -0.0018050455 -0.0021205912 0.0000072619 0.0009393331 -0.0009360396 0.0014932008 0.0000538569 0.0002029510 -0.0003362729 -0.0006956180 0.0018347876 -0.0000857368 0.0001776711 0.0003360041 -0.0023153390 -0.0008634800 0.0004408095 0.0001653296 -0.0005408726 -0.0002954463 0.0005658708 0.0001108148 -0.0000332671 0.0006069173 -0.0009921830 0.0044366383 -0.0004817013 -0.0024336703 -0.0025534509 0.0015845979 0.0007584631 0.0051928127 0.0002587515 -0.0043376781 -0.0001075488 0.0010616301 0.0010217739 0.0000251002 0.0008214190 0.0007210513 -0.0009190156 0.0001974575 -0.0000969485 -0.0014560110 -0.0000527797 0.0020599725 0.0011671601 0.0013691815 -0.0013223560 -0.0010051878 0.0007191917 0.0021944495 0.0008214384 0.0011557563 -0.0013632227 -0.0011467350 -0.0237692102 -0.0425907724 0.0122772503 -0.0058243561 -0.0012225040 -0.0119207600 0.0132377878 0.0370555480 0.0278591294 0.0036326564 -0.0157439759 0.0556564658 0.0332484482 0.0370598969 0.0246147866 0.0100742294 -0.0175117534 -0.0001165515 -0.0195108729 0.0303587464 -0.0512999306 -0.0019044178 0.1058498954 0.0110721502 -0.0154669025 -0.0355479252 -0.0293655786 0.1016813414 0.1062384296 -0.0185122673 0.0621453296 -0.0015676472 -0.0576695008 0.0643625325 -0.0141335115 0.0140189940 -0.0190270853 0.0597427512 0.1092661413 -0.0604404683 0.0711389165 0.0627884974 -0.0903748132 0.0248377742 0.0853319981 -0.0065214540 -0.0635090647 -0.0116180113 0.1910355843 -0.0533904591 0.0198558846 0.0628777238 0.0540107044 0.2052046199 0.0541771670 -0.0276998038 -0.1128795396 -0.1711517889 -0.0507151738 0.1185236186 -0.0154151522 -0.1897167768 -0.0584623555 0.0439061010 -0.0212702062 -0.0289142106 -0.0619053372 0.0106663173 -0.0150001906 -0.0980713622 -0.0932989590 -0.1005256520 0.1590715492 0.0438535678 -0.0060193159 0.0047022008 0.0551116784 0.1331528917 0.0135175995 -0.0225279904 -0.0519576359 -0.0140466051 0.0260287463 0.0770988317 -0.0478151519 -0.0489608836 -0.0996330838 -0.0166936066 -0.0061692874 -0.0024680694 -0.0930206859 -0.1183174070 -0.3235377579 0.0005545191 -0.0569881601 -0.0894835579 0.0330776201 0.0322304047 0.1233832966 -0.0242273929 -0.0735991244 -0.1342719851 0.0777592124 0.1131929703 0.2632334170 0.0018748937 -0.0275053221 -0.0109478402 -0.0242626262 -0.0026719215 0.0292289705 0.0028586085 -0.0404616380 0.0045379533 -0.0152581279 0.0158135541 0.0310856009 -0.0051865770 -0.0430762990 -0.0051854637 -0.0618555293 0.0624085125 0.0218172939 0.0024548749 0.0217959391 0.0459338434 0.0595658418 -0.0021823530 0.0199957949 0.0110825928 0.0252636765 0.0576579345 0.1092783282 -0.0195223369 -0.0095544305 0.0024239661 0.0006548174 0.0003636993 0.0044243093 0.0000901647 0.0006622597 0.0006874415 -0.0028183112 0.0002282627 0.0049478031 0.0019091493 0.0009145446 -0.0036779969 -0.0007361483 -0.0010214089 -0.0037965575 -0.0027511125 -0.0019820241 -0.0027111689 -0.0011205980 0.0001854252 -0.0059500004 0.0008035994 -0.0025109955 -0.0201737100 -0.0640215479 -0.1043290811 0.0110643480 0.0258006763 0.2010382745 0.0106033174 -0.0381564997 0.0368906381 -0.0493075954 0.0118031789 0.0354968453 -0.0562231023 -0.0496301645 -0.0750410714 0.0997230553 -0.0524962517 0.0081522353 -0.0097860616 0.0274535802 0.0687224006 -0.0754138107 -0.0241907527 0.0424158801 0.0725872125 -0.0681267599 -0.0452910478 -0.2331493015 0.0976646934 0.1792937082 -0.0364554648 -0.0637646115 0.0918244380 -0.0362430756 -0.0209552174 0.0827774050 0.0208742691 0.0594949221 -0.0270984118 0.0645589434 0.0087682783 -0.0232257177 -0.0901108545 -0.0120597986 -0.0375837276 -0.0401921588 0.0010905355 0.0675245588 -0.0193314688 -0.0384875749 0.0030270183 0.0096506905 -0.0074061864 -0.0150720524 0.0023733531 0.0261989240 -0.0066497952 0.0288849073 -0.0182818695 -0.0211377954 0.0118306880 0.0423105533 0.0106735192 0.0129552756 0.0388576732 0.0085538959 0.0092013218 -0.0203250919 -0.0167459393 0.0368499311 -0.0180708232 -0.0056826924 -0.0034136225 0.0480620282 0.0349408492 0.0245354940 0.0306748142 0.0239842522 -0.0267943281 -0.0113935242 0.0229896734 -0.0407148639 -0.0210062904 0.0097440055 -0.0690321564 0.0021786137 0.0007126389 0.0066217033 0.0082134241 -0.0093232672 -0.0064833270 -0.0056300995 -0.0036060770 0.0130984139 0.0079635410 -0.0065061750 0.0150798897 0.0083395750 -0.0061350751 -0.0003911968 -0.0012812857 0.0050927853 -0.0000522382 -0.0057503881 0.0033992213 0.0250572009 0.0012275486 -0.0068958592 0.0157968393 0.0215970015 -0.0039616061 -0.0091132808 0.0053108790 0.0155341756 0.0026206202 -0.0188904951 0.0089577690 -0.0088567942 -0.0052960334 -0.0080979618 -0.0053051169 -0.0302415532 0.0077017299 -0.0093026587 -0.0204981682 -0.0031493441 -0.0594587649 0.1297707476 -0.0588309742 0.0014915768 -0.0059980695 -0.0045117738 0.0006561860 -0.0022775497 -0.0002569542 -0.0034637430 0.0033581209 0.0034241295 0.0016999582 -0.0000474275 -0.0003340270 -0.0011222974 -0.0002835659 0.0035167068 0.0003100448 0.0002825571 -0.0017320990 0.0005047022 0.0021365114 0.0015294145 0.0019638250 0.0035603182 0.0012941404 -0.0016816360 0.0044980242 0.0033547246 -0.0028715899 -0.0034904748 0.0039272259 0.0004931808 0.0018786995 -0.0040996355 0.0011775727 0.0060202759 0.0092155307 0.0073532123 0.0054459396 0.0014604569 0.0020523840 -0.0074835409 -0.0010882665 -0.0044399993 0.0018474312 -0.0020586744 -0.0010264419 0.0014510856 0.0043077525 -0.0004732177 0.0035760535 0.0059843548 -0.0003395332 -0.0021466961 -0.0004498142 -0.0036454717 0.0059912744 0.0047938092 -0.0028219060 -0.0002990736 0.0012717767 -0.0034775651 0.0058926977 0.0049639810 0.0156207780 0.0293820110 0.0381647178 0.0117606283 0.0083676934 0.0470350593 -0.0055583297 -0.0347071812 -0.0656417350 -0.0154203692 -0.0246966691 -0.0540547936 -0.0349318517 -0.0317223643 -0.0604001931 -0.0049376639 0.0277817621 0.0329841528 0.0671902864 0.0026439642 0.0721518694 0.0559968405 -0.0776861523 -0.1105881491 0.0151831297 0.0313779195 0.0509099629 -0.1213222239 -0.0481379901 -0.0760959465 -0.0620690384 0.0712333695 0.0715523810 0.0392101737 0.0192050348 0.0289852976 0.0200264141 -0.0119388015 0.1052542354 -0.0854921718 0.1435250250 0.0205983012 -0.0476584784 -0.0337190710 0.0843644957 -0.0362768338 -0.0273279765 0.0056174428 0.1983236937 -0.1645454577 0.0842137838 0.1671255263 -0.2064733278 0.2279566463 0.0377224570 0.0088959583 -0.1161707549 -0.0061804953 -0.2824511486 0.1642178940 0.0446349008 -0.2797152277 0.0207303466 -0.0610274248 0.0352911621 0.0359767509 0.0819212701 -0.0073495103 0.0177965593 -0.0822359858 -0.0917007027 -0.0817308376 0.1404662709 0.0274708559 -0.0009223040 0.0297535082 -0.0141659213 0.0026756363 -0.0319741106 -0.0004142610 0.0119852274 0.0421748247 -0.0031646808 -0.0164429797 0.0597622560 0.0205070165 -0.0103976385 0.0118126516 -0.0097705012 -0.0365591150 0.0692975519 0.0013175156 -0.0076210336 -0.0187196048 0.0275833568 -0.0152318502 -0.0064606425 0.0245687011 -0.0084282122 0.0045494750 0.0206485606 -0.0300855805 -0.0333793644 -0.0154567629 0.0006548602 0.0232059653 0.0055574399 0.0331644038 0.0195347747 -0.0526013445 -0.0555028027 -0.0024806509 0.0471036063 0.0310377119 0.0587575607 0.0184598015 -0.0119625846 -0.0589217122 0.0547322334 0.0257835280 0.0963323197 -0.0274474876 0.0091684199 -0.0069229684 -0.0084241292 -0.0559373277 -0.0560286830 0.0266294244 -0.0364740714 -0.0226954000 0.0220705188 -0.0046939958 -0.1465694092 0.0268209015 0.0113241028 -0.0063032786 -0.0022744540 -0.0004267140 -0.0144914352 -0.0021344606 -0.0001239024 -0.0008921954 0.0090820495 -0.0013281637 -0.0149474297 -0.0027130692 0.0007286307 0.0114266573 -0.0025875565 -0.0030267754 0.0037387686 -0.0109809496 -0.0013675580 0.0167531372 0.0021469583 0.0071109986 0.0232920292 0.0003930711 -0.0099991748 0.0081407762 0.0158368669 0.0072663407 0.0074996292 -0.0067488094 -0.0657769524 0.0011218716 0.0107159389 -0.0217794833 0.0164302973 0.0039799827 0.0018866269 0.0177325988 0.0144465578 0.0176554032 0.0177051377 -0.0015347385 -0.0057906845 0.0138859009 0.0000325879 -0.0005462771 -0.0080192965 0.0036862197 0.0062732013 0.0017236007 0.0021996244 0.0009880473 -0.0236733306 0.0133759219 0.0161073896 0.0069076094 0.0114838097 0.0073515808 0.0177457062 0.0007135192 -0.0138624416 -0.0211176412 -0.0105982183 -0.0038112019 -0.0120796606 -0.0094101851 0.0177348110 0.0291474205 0.0066754886 -0.0058347595 -0.0777326074 0.0237023844 0.0653525844 -0.1335571347 -0.0454129508 -0.1215695675 -0.0076414054 -0.0007881852 -0.0746418447 -0.0123611476 0.0501193760 -0.0377137768 0.0913278649 -0.0493776198 -0.0276774278 0.0520048307 0.0724663329 0.0741116927 -0.0083773874 0.0850421158 -0.0051712049 0.0353916050 -0.0735468047 -0.0065260768 0.0942738940 -0.0347348425 -0.0162465044 0.0496730669 0.0696842649 0.1541281063 -0.0118504723 0.0803948400 -0.0163789240 -0.0290435423 -0.0100881356 0.0326215366 -0.0405656163 -0.0411964865 0.0332698509 -0.0764602183 -0.0104420124 0.0156485317 0.0027779086 0.0089951611 -0.0335183615 -0.0156144497 0.0001956078 -0.0142714895 0.0177201159 0.0132875511 -0.0184602338 0.0157253104 0.0119372954 -0.0100674825 -0.0003353466 -0.0002102454 0.0142014604 0.0073209982 -0.0064505024 0.0125599066 0.0405153783 0.0021396393 0.0043716152 0.0308211646 0.0324664226 0.0236143282 0.0038428034 0.0027765900 0.0519061755 0.0234924850 -0.0325680782 0.0503096086 -0.0194153995 -0.0008429151 -0.0170673003 -0.0839952091 -0.0418956158 0.0119078310 -0.1053653226 0.0578861050 -0.0189231212 0.0026543044 -0.0062793417 0.0036067513 -0.0900023303 -0.0313530902 0.0388558967 0.1758004395 0.0364164533 -0.0350099711 0.0600444185 0.1355810456 0.0999746973 -0.0615087374 -0.0290537973 0.0055718405 -0.0724436196 0.0631870708 -0.0211681422 -0.0219730129 -0.0412565224 0.0712366073 -0.0089532316 -0.0610303135 -0.0588598395 0.2579636488 0.0416996576 -0.0940355868 0.0145501765 -0.0613644877 -0.0425374418 0.0095098191 0.0855168280 -0.0193479161 -0.1263856441 0.1986043048 -0.0311758775 0.0159682613 0.0309475497 -0.0056032422 -0.0047263850 -0.0276832078 0.0833686377 -0.0145238999 -0.0408598597 0.1334920925 0.0140337690 -0.0022614230 0.0297805124 -0.0070702249 -0.0616981366 -0.0662682291 -0.0050893639 -0.0707687744 -0.0767763833 -0.0076656166 -0.0516924515 -0.0547642874 -0.0925017190 0.0355476951 0.0539311313 -0.0409223192 -0.3050534954 -0.1547679108 -0.0866251318 0.0157593802 0.0497453967 -0.0014604096 -0.0022829448 -0.0035052823 0.0004022661 -0.0027650746 -0.0047515408 0.0028546310 0.0031398702 0.0044704183 0.0009401182 0.0027069024 0.0038851843 0.0007822987 0.0064514193 0.0025873048 -0.0043253883 -0.0037781355 -0.0027126793 -0.0010199471 -0.0009989557 -0.0073166724 -0.0012295961 0.0151973480 0.0029290803 0.0004019084 -0.0010680921 -0.0033073427 0.0094392516 0.0118744884 0.0003627347 0.0001886714 -0.0066202460 -0.0060752077 -0.0034088225 -0.0061009475 -0.0019131847 -0.0033302262 -0.0018200369 -0.0072332354 0.0029244302 -0.0094264332 -0.0025390893 -0.0003711093 0.0009389971 -0.0064189890 0.0003112769 -0.0031555821 0.0011628935 -0.0147678559 0.0028266354 -0.0043742776 -0.0128837503 0.0117755483 -0.0148400032 -0.0005519770 -0.0002776702 0.0069062813 -0.0047839908 0.0204163203 -0.0125512617 -0.0041973045 0.0105230686 0.0001110091 0.0037633535 -0.0022952942 -0.0018372073 -0.0040344952 0.0003717514 -0.0008478458 0.0075125225 0.0061863622 0.0047992021 -0.0064293542 -0.0010426367 0.0016217397 -0.0046826500 0.0092167737 0.0165047863 0.0088626055 -0.0082615221 -0.0180654793 -0.0128660914 0.0092523735 0.0204911474 -0.0255073546 -0.0132310559 -0.0196824688 -0.0070223743 0.0096625608 0.0223840673 -0.0343392233 -0.0220889953 -0.0571114467 0.0024415704 -0.0201911394 -0.0144836256 0.0043414480 0.0028293857 0.0260866989 -0.0045720393 -0.0174984762 -0.0078263044 0.0224490801 0.0335360763 0.0608597148 -0.0124753232 0.0070794472 0.0128706159 0.0096716415 -0.0088660842 -0.0051677783 -0.0141191074 0.0104298521 0.0060615308 0.0165677747 -0.0080840425 -0.0149563926 -0.0099932564 0.0055086995 -0.0026911607 0.0520949905 -0.0281884327 -0.0327878134 0.0118773514 -0.0126475432 -0.0092195859 -0.0227909484 0.0095523516 0.0067366928 0.0178739369 -0.0140161467 -0.0094939439 -0.0472003836 0.0257901296 0.0233527391 -0.1076956717 -0.1297150056 -0.0108154387 0.0408057293 -0.0627168785 -0.0734426444 -0.1710294252 -0.2397830269 -0.0570238184 -0.1006344309 -0.1946676372 -0.0605050413 -0.1047856568 0.0695779974 0.0693613771 -0.0667098708 0.1265209060 0.0649233504 -0.1964680091 0.1774755916 0.1035946052 0.0477584059 0.0829797495 0.0207136894 0.0169067507 0.0269888489 0.0445382181 -0.0195851578 -0.0287771783 -0.1748196869 -0.0104355753 0.0190569343 -0.0505614278 0.0563588723 -0.0049200763 0.0025489184 0.0528082715 0.0151861936 0.0526967284 0.0625931571 -0.0175754437 -0.0126518305 0.0617482595 -0.0182303610 -0.0043450122 -0.0362999152 0.0140060849 0.0359728522 0.0088861198 -0.0046126149 0.0078875320 -0.0972094029 0.0598853645 0.0871882741 0.0026718994 0.0479781921 0.0434282377 0.0430372259 -0.0143757330 -0.0520567796 -0.0659556304 -0.0149030249 -0.0169863464 -0.0186044159 -0.0314563015 0.0515660936 0.0515662888 0.0292919504 -0.0252340107 0.0121251436 -0.0558489090 0.2355820586 -0.1891601387 -0.0073744551 -0.1752791508 -0.0193191145 0.0358994834 -0.0893801166 -0.0269037399 0.0455657817 -0.0484014941 0.1190399713 -0.0389718679 -0.0198824953 0.0704933584 0.0933709320 0.1128385662 -0.0439058767 0.0971429882 -0.0091710407 0.0460170951 -0.0932093792 0.0125456295 0.1078031357 -0.0093865747 -0.0285159102 0.1010981561 0.0755800426 0.2042487077 -0.0464605383 0.0884883357 -0.0219608762 -0.0274368205 -0.0450368240 0.0485989894 -0.0846576558 -0.0666339396 -0.0125580441 -0.1635505071 0.0022200786 -0.0829460795 0.0307020259 -0.0056986528 -0.0111015857 -0.0240675819 0.0109995188 0.0073332479 0.0385764136 0.0279059568 -0.0152159183 0.0229396597 0.0089309785 -0.0026405094 -0.0181146120 -0.0060564721 0.0111281451 0.0046007551 0.0018448060 0.0045964093 0.0348833204 0.0286525214 -0.0335666895 0.0065012447 0.0616317933 -0.0348766390 -0.0329462771 0.0011673239 -0.0022970474 0.0000824016 -0.0443609196 -0.0085171951 -0.0306941452 0.0150084691 -0.0138118870 -0.0809771766 -0.0603266185 -0.0059466274 -0.1128641849 0.0530847502 -0.0915363213 0.0111535647 -0.0182686649 0.0054054640 0.0546804606 -0.0122036457 -0.0335304068 -0.0729709168 -0.0274902708 0.0210631288 -0.0438591404 -0.0467728914 -0.0327221724 0.0288766885 0.0131950138 -0.0012435716 0.0332344503 -0.0327943317 0.0048661026 0.0071097383 0.0211700710 -0.0351739564 0.0042324816 0.0287531732 0.0280228301 -0.1040838040 -0.0043736072 0.0444146638 -0.0129046276 0.0472603491 0.0333524615 0.0072829453 -0.0436186314 0.0083998445 0.0534225632 -0.0844933628 0.0105767833 -0.0007261580 -0.0194625482 -0.0002856298 -0.0040139167 0.0115119835 -0.0492064520 0.0044801386 0.0255904408 -0.0552953171 0.0052935241 0.0017918388 -0.0186630302 0.0017234998 0.0267571075 0.0286115160 0.0009562026 0.0357058848 0.0383791357 0.0020437224 0.0245721085 0.0258008463 0.0258315308 0.0094121337 -0.0045776339 0.0069864536 0.1323737601 0.0738657034 0.0252892763 0.0163362766 -0.0020166498 0.0054852473 0.0076625163 -0.0230936966 0.0006391717 -0.0016360819 -0.0157014988 -0.0023115760 -0.0035194879 0.0224178224 0.0028282350 0.0217903797 -0.0019072040 -0.0099999789 -0.0002622112 0.0203354735 -0.0113393619 0.0009576621 -0.0182068218 -0.0182707422 -0.0163913805 -0.0054335038 -0.0256931177 -0.0186497549 0.0543729265 0.0021757391 0.0035381846 -0.0094367922 -0.0050418018 -0.0282828998 0.0497408548 -0.0102878150 -0.0210590061 -0.0103447022 -0.0037559073 -0.0110475109 -0.0068589472 -0.0122096258 0.0084321144 -0.0112131149 0.0021602706 -0.0188695735 0.0006725253 -0.0078708247 0.0021406624 -0.0063154092 -0.0017879383 -0.0078977240 -0.0005564801 -0.0221514233 0.0068978664 -0.0119398459 -0.0276650581 0.0392195052 -0.0216473106 0.0017851241 -0.0036302941 0.0091934262 -0.0239620598 0.0371132595 -0.0165045603 -0.0167939746 0.0175764466 -0.0101194841 0.0109549264 -0.0063115139 -0.0012431583 -0.0043735292 -0.0035028293 -0.0014476843 0.0101462963 0.0084876429 0.0037932162 -0.0033168089 0.0036195100 0.0032283452 -0.0126651856 0.0331256785 0.0309174628 0.0283789801 -0.0083023801 -0.0450253226 -0.0284100048 0.0296302021 0.0434660953 -0.0653785028 -0.0358194785 -0.0397719321 -0.0000585151 0.0303857666 0.0486049005 -0.0820372505 -0.0601061681 -0.1200845917 0.0031890087 -0.0466699434 -0.0326078411 0.0077123899 -0.0012775909 0.0608934554 -0.0277185818 -0.0388879350 -0.0148263676 0.0502329523 0.0706298765 0.1375999596 -0.0489083745 0.0351631440 0.0558928359 0.0390540896 -0.0326133276 -0.0241482236 -0.0567427635 0.0545964709 0.0293962429 0.0758419052 -0.0340657862 -0.0627535483 -0.0338957387 0.0345562823 -0.0039034483 0.2354801141 -0.1291866870 -0.1351814912 0.0505198122 -0.0549619694 -0.0475230352 -0.1045559263 0.0409128866 0.0260384629 0.0800517035 -0.0641652884 -0.0542673679 -0.2127334109 0.1055262924 0.0977860858 0.0324542832 0.0523867548 0.0036937850 -0.0759991759 0.0266078505 0.0309606802 0.0877465805 0.1553735569 0.0259820605 -0.0065044195 0.0748927449 0.0275887650 0.0938555457 -0.0476225374 -0.0354815176 0.0712521707 -0.0685276959 -0.0285973734 0.1244598803 -0.0749949836 -0.0358787590 0.0507330538 -0.0460953187 -0.0309565479 0.0105771201 0.0072027524 0.0530770945 -0.0420622103 -0.0381923431 -0.1394690632 -0.0145322665 0.0013705692 -0.0337374001 0.0481972121 -0.0229957928 -0.0044011754 0.0416293814 -0.0082627788 0.0475202215 0.0610205274 -0.0305627795 -0.0031162254 0.0679246783 -0.0334048485 -0.0036330994 -0.0419296304 0.0042499369 0.0442042627 0.0048225977 -0.0160454865 0.0151325361 -0.0972748982 0.0549387005 0.1053999071 -0.0028725520 0.0437802133 0.0533744560 0.0312421403 -0.0242993628 -0.0460285277 -0.0568749282 0.0036965377 -0.0208884132 0.0012996868 -0.0225364978 0.0430834423 0.0200603168 0.0309339912 -0.0354375958 -0.1037447177 0.0970597445 -0.1451376199 0.2547104236 -0.1498495548 0.3029639985 0.0620216205 -0.1235723637 0.1020745697 0.0621209271 -0.0006413939 0.0733508737 -0.1132818763 -0.0133408268 -0.0414328292 -0.0911601238 -0.0454104793 -0.1715149687 0.1194682896 -0.0459829698 0.0286722935 -0.0524692268 0.0794379604 -0.0796579247 -0.0721975718 -0.0669226404 0.0103693120 -0.2029672363 0.0071269011 -0.2307974685 0.1581394861 -0.0544417488 0.0958804625 -0.0226728135 0.0562453937 -0.0101740972 0.0043186468 0.0760530101 0.0252999732 0.0474691906 0.0346185556 0.0982749186 -0.0293520815 0.0398857263 0.0249278579 0.0358814751 -0.0508909857 -0.0126053531 -0.0369978713 -0.0292753663 0.0178147167 0.0128474280 0.0091429453 -0.0090135148 0.0325762052 0.0073505503 -0.0206921787 -0.0211311859 -0.0231189873 -0.0048021990 -0.0056641514 -0.0482092059 0.0067651645 0.0218367892 -0.0458697221 0.0070194512 0.0113144191 0.0218390135 -0.0024376881 -0.0217593547 0.0376712404 -0.0050355209 0.0418025952 -0.0543671863 0.0055968426 0.0392842402 0.0550086081 0.0662035970 0.0385768633 0.0170869118 -0.0304644743 0.0073142923 -0.0084311426 -0.0059813700 -0.0151287441 0.0185470263 0.0205543281 0.0188474386 0.0124543401 -0.0052438766 0.0228006848 0.0014217694 0.0010371332 -0.0111563578 -0.0051708174 0.0013190647 -0.0111724801 0.0124111084 -0.0064286228 -0.0010814621 -0.0057372169 0.0121073907 -0.0025458468 -0.0111367215 -0.0102640285 0.0218931814 -0.0065571329 -0.0138934955 0.0063950214 -0.0231626503 -0.0168316385 0.0004837178 0.0165315732 -0.0060280433 -0.0183116593 0.0253585603 -0.0019507697 -0.0054857961 0.0054051435 -0.0091673562 -0.0134894578 -0.0144355985 0.0042190260 -0.0044580818 0.0112003407 0.0209502509 0.0067058809 -0.0105483811 0.0137401472 0.0026808188 -0.0062034485 -0.0099043372 0.0021689635 -0.0193376910 -0.0224575082 0.0027800773 -0.0037564046 -0.0059470565 0.0010070981 -0.0157470142 -0.0092160457 0.0037628213 -0.0335294300 -0.0223938156 -0.0000863837 -0.0169266933 -0.0106308297 0.0144040828 0.0228657466 -0.0328035122 -0.0001621562 0.0072347934 -0.0154769208 -0.0114423177 -0.0123585590 0.0234391339 0.0025133276 0.0358175154 -0.0192676142 -0.0203243848 -0.0134594757 0.0223611100 -0.0117178939 0.0110503599 -0.0242638240 -0.0275417986 -0.0233890593 0.0098052358 -0.0379963890 -0.0679168076 0.0785766799 0.0071100258 0.0126047998 -0.0088403522 -0.0351375604 -0.0770106524 0.0795142722 -0.0273638868 -0.0242790552 0.0055082843 0.0018970706 -0.0049266343 -0.0106280217 -0.0062807472 0.0013603954 0.0064876199 -0.0035336973 -0.0040734931 0.0076562823 -0.0091106616 0.0074690085 0.0060719497 0.0044965064 -0.0056151710 -0.0078578461 0.0035618013 0.0084462519 -0.0156661555 -0.0036068503 0.0151700603 0.0133292665 0.0042816069 -0.0022290029 -0.0028240400 -0.0196420505 0.0072452018 0.0073756193 -0.0023204232 -0.0090236443 -0.0169234978 0.0073596907 -0.0053424940 0.0036642050 0.0061161214 -0.0068546985 0.0005042730 -0.0006322769 -0.0031711216 -0.0037667012 0.0089219816 0.0033479712 0.0013248027 -0.0046147848 0.0317046103 0.0193943754 0.0197928580 0.0033439355 -0.0303050060 -0.0126132455 0.0280602006 0.0233166848 -0.0428100212 -0.0250829189 -0.0239867000 0.0127889301 0.0262661747 0.0213352831 -0.0485198756 -0.0517419754 -0.0751543317 -0.0062822372 -0.0273265221 -0.0223701700 -0.0028531626 -0.0026439329 0.0414640471 -0.0365072319 -0.0228938355 -0.0137712530 0.0217487163 0.0395910019 0.0901725550 -0.0487326085 0.0417599311 0.0627287866 0.0361947189 -0.0335884056 -0.0314532208 -0.0541212772 0.0657926869 0.0373486598 0.0888366034 -0.0313196093 -0.0614533057 -0.0287895306 0.0442702113 0.0018026204 0.2630711785 -0.1398624464 -0.1326975714 0.0509958430 -0.0547363130 -0.0620170441 -0.1165449314 0.0454072647 0.0221346941 0.0855947643 -0.0652295859 -0.0695840744 -0.2386505278 0.1031667382 0.0996415564 0.0076745371 -0.0017642827 -0.0029491038 0.0612728121 0.0027815862 -0.0099102663 -0.0198920280 -0.0531601322 -0.0163400624 0.0255516904 -0.0050927206 -0.0087951719 -0.0465226071 0.0180557684 0.0114778084 -0.0451720246 0.0070272454 0.0069162168 -0.0406657046 0.0143884372 0.0144600966 -0.0531556865 0.0206410960 0.0115297085 0.0073388131 0.0192388673 -0.1014832915 0.0845893044 0.0573350196 0.0461627479 0.0244170428 0.0328896349 -0.0249729158 -0.0171632158 0.0792322990 0.0924414651 0.0008253160 0.0522737925 -0.0105937552 0.0007778594 0.0239607211 -0.0150723946 -0.0773677701 0.0713318536 0.0649097848 0.0014661656 0.0080875461 -0.0207875001 0.0658079620 -0.0344262996 -0.0633570657 -0.0745128052 0.0482851338 0.0149683757 -0.0056939693 -0.0141179992 -0.0201712975 0.0326581095 -0.0118235385 0.0208039151 -0.0105734723 -0.0226040332 -0.0042651787 -0.0159896633 -0.0046581885 0.0074471357 0.0194474451 -0.0018080994 0.0011169293 -0.1516963573 0.0609251019 0.0587956703 0.0888094022 -0.2238663670 0.2232177481 0.0725060756 -0.0994160681 0.0383265250 0.0561095120 0.0466850782 0.0462395359 0.0280337940 -0.0582998659 -0.1090533669 -0.0365710550 0.1072451802 -0.0839696139 0.0868411495 0.0751002376 0.0549929855 -0.0128083053 -0.0311556622 -0.1072718431 0.0674360399 -0.0774028143 -0.0451732829 -0.1468566791 0.1564978730 -0.0753433035 0.1325536910 0.0488062732 0.1208689984 -0.0726158417 0.0081071024 0.0367493655 -0.0958332426 -0.0061860773 0.0218237645 -0.1386318789 0.0250443247 0.0415005633 0.0074265727 0.0354194321 0.0108561739 0.0072969821 -0.0402489967 -0.0023532862 0.0101534430 0.0069917675 0.0002746129 0.0441945917 0.0199360805 -0.0157034691 0.0102803325 -0.0027853144 -0.0090880994 -0.0197702490 -0.0204566185 -0.0000827610 0.0433497743 -0.0142195378 -0.0272946771 0.0396703117 0.0261855843 -0.0253626479 -0.0314135719 0.0230724179 0.0013386015 -0.0247882222 -0.0158030197 -0.0135439892 0.0117171093 -0.0380008003 -0.0029635696 -0.0666455660 -0.0322169754 0.0691411006 -0.0851874279 0.0372940175 0.0167658690 -0.0064039151 -0.0116956352 0.0354479611 0.0168647707 0.0003375536 -0.0068866793 -0.0178376559 -0.0059475065 0.0052420481 -0.0084894540 -0.0152503454 -0.0100803090 0.0076142332 0.0038000707 -0.0016765687 0.0059753271 -0.0050225874 0.0007813380 0.0011907584 0.0033298256 -0.0046372441 0.0005971336 0.0056642249 0.0051596552 -0.0280649220 -0.0022142469 0.0113436271 -0.0033799068 0.0107099850 0.0073597186 -0.0013851874 -0.0062071301 0.0003138415 0.0114889929 -0.0184500821 0.0010012329 -0.0031188229 -0.0018814937 -0.0009848938 -0.0069500953 -0.0028387781 -0.0049284983 -0.0005936515 0.0117755814 -0.0002409099 0.0086598923 -0.0018640701 -0.0028988017 0.0018666644 0.0074601869 0.0074895904 0.0011337387 0.0049785380 0.0055867838 0.0017066113 0.0040872219 0.0047150307 0.0075494984 0.0009298799 -0.0023858133 0.0021159467 0.0347717761 0.0186851828 0.0068824075 0.0031466324 -0.0021256170 -0.0233046715 -0.0386289582 0.0588034800 -0.0012532982 -0.0138294688 0.0346340526 0.0189095715 0.0209882946 -0.0418403688 -0.0082123748 -0.0603899430 0.0299688942 0.0251578638 0.0250742228 -0.0401594677 0.0106317539 -0.0159676727 0.0424878016 0.0568373697 0.0508878910 -0.0171992577 0.0715933527 0.1211752174 -0.1460314010 -0.0067662356 -0.0181973198 0.0169428403 0.0483613814 0.1394942139 -0.1445495013 0.0379054980 0.0597713339 -0.0152685270 -0.0315135737 0.0040244837 0.0211617540 0.0017237338 -0.0207194849 -0.0411026801 0.0143481437 -0.0244584477 -0.0294316550 0.0150471851 -0.0123588005 -0.0337693903 -0.0269381167 0.0133745842 0.0298118247 -0.0899461818 0.0023239625 0.0261799319 -0.0342899361 -0.0284697158 -0.0864357997 -0.0115086787 0.0100736163 0.0274487977 0.0613672903 0.0177008742 -0.0478430287 -0.0180363801 0.0579212640 0.0535358590 -0.0123091388 0.0096368902 -0.0032527210 -0.0024932129 0.0102532762 -0.0001465409 0.0347115328 0.0244572068 0.0263246798 -0.0320162096 -0.0066146412 0.0082512255 -0.0037270049 -0.0141627780 0.0192842532 -0.0140714410 -0.0510627487 -0.0658353925 -0.0057338115 0.0091907574 0.0757365322 -0.0173595752 -0.0263150179 -0.0881945184 -0.0146176294 0.0362351467 0.1424251870 -0.0425739000 -0.0372194206 -0.1767579689 0.0066738102 -0.0322688872 -0.0512993010 0.0264331818 0.0344852011 0.0686770674 0.0427149930 -0.0103783659 0.0111632660 0.0651335527 0.1083513988 0.2321228179 0.0683509555 -0.0445735944 -0.0372610608 -0.0107151889 0.0002474155 0.0072081339 0.0454311387 -0.0304918995 -0.0314346814 -0.0688688933 0.0370715434 0.0388926538 -0.0257257641 -0.0047147675 -0.0048115462 -0.2255571081 0.1153501921 0.1341833077 -0.0593656185 0.0303094809 0.0414303722 0.0776335788 -0.0369061670 -0.0540118482 -0.1127240942 0.0636532497 0.0847175131 0.1534734164 -0.0717165452 -0.1019568593 0.0140729732 0.0201413440 -0.0019804286 -0.0085159819 0.0115999030 0.0060473199 0.0268292854 0.0454495337 -0.0021191256 -0.0027738360 0.0266333875 0.0057715044 0.0234677008 -0.0131333173 -0.0117360833 0.0058383611 -0.0365936430 -0.0082352994 0.0444689903 -0.0227330484 -0.0006472923 0.0082056450 -0.0066228789 -0.0167677434 0.0106772873 0.0012106559 -0.0802725966 0.0460806039 0.0284281123 -0.0051340140 0.0150147453 0.0172179731 -0.0380650157 0.0136603577 0.0674433579 0.1182155229 0.0235350571 0.0300516386 0.0221551819 0.0613801843 -0.0034708191 -0.0163219737 -0.0212465027 0.0469457559 0.0816510407 -0.0432221348 0.0001870920 0.0081262845 0.0841661512 -0.0587163140 -0.0686291331 -0.1871823782 0.0941927599 0.1048572405 -0.0294454751 0.0048460348 0.0359114346 0.0484394568 -0.0465378272 -0.0122742659 -0.0491153647 -0.0046868707 -0.0263923579 0.0080672709 -0.0223893583 0.0412425400 0.0058018204 0.0259259132 -0.0367086996 0.1506620441 -0.0378443849 -0.0579058776 -0.0497717988 0.2100805314 -0.2408897177 -0.0792704083 0.0540298316 -0.0511943818 -0.0550512703 -0.0288504789 -0.0479137603 -0.0712643437 0.0388633782 0.1318876773 0.0342479576 -0.1661446542 0.0631201101 -0.0475690009 -0.0884508263 -0.0855391761 0.0112105170 0.0614049452 0.1148486182 -0.1031448406 0.0382458731 0.0721130735 0.1220328786 -0.2075593496 0.0856011173 -0.0890447394 -0.0580525026 -0.1400188015 0.0730674494 0.0157460203 -0.0222751400 0.0955500742 0.0449921834 -0.0054857050 0.1499183369 0.0036538994 -0.0145139911 -0.0271987819 -0.0107854485 -0.0079538831 0.0076909955 0.0126581371 -0.0139320297 -0.0315794087 -0.0208433569 0.0043931978 -0.0348384698 -0.0140767850 0.0093923056 0.0105831643 0.0050240147 0.0053192966 0.0103054382 0.0064801977 0.0063463346 -0.0440201801 -0.0116130106 0.0309009191 -0.0266423336 -0.0495693590 0.0251244586 0.0406074534 -0.0114194440 0.0149767090 0.0212491218 0.0320423872 0.0347056059 0.0033442799 0.0104965477 -0.0136952231 0.0805212352 0.0708718866 -0.0542860968 0.0909347670 0.0110860007 -0.0818129834 -0.0140681932 0.0062047032 0.0312885211 -0.0110536885 0.0102644295 0.0143748986 0.0089261146 0.0073359131 -0.0010140115 0.0126080116 0.0010101299 -0.0012524053 -0.0045148577 -0.0021082772 0.0008114404 -0.0056504463 0.0064272762 -0.0046297142 -0.0027259091 -0.0026008867 0.0060810960 -0.0007457471 -0.0060257832 -0.0058281133 0.0101365179 -0.0053995736 -0.0080947860 0.0046853322 -0.0148981986 -0.0105625832 0.0007198359 0.0071143305 -0.0028755165 -0.0090120469 0.0105728754 -0.0002287280 -0.0071652613 0.0049308880 -0.0064930014 -0.0028514401 -0.0032708346 0.0016014819 -0.0017404241 -0.0041168506 0.0082678553 -0.0013617903 -0.0018792357 0.0059601408 0.0001235374 -0.0055091169 -0.0065785506 0.0001751260 -0.0078907146 -0.0084828692 -0.0003221441 -0.0048339248 -0.0052854806 0.0031229635 -0.0123426769 -0.0078425539 0.0041451552 -0.0172935202 -0.0119976691 0.0026904567 -0.0133659401 -0.0085238695 -0.0042991373 -0.0101128312 0.0376574627 -0.0046463252 0.0015465509 0.0370155280 -0.0003943856 0.0041769097 -0.0326251130 -0.0102956732 -0.0307729752 -0.0004899944 0.0024709372 0.0015956725 -0.0322570809 0.0061400628 0.0020467929 0.0293039328 0.0405692607 0.0429655497 0.0078982203 0.0415011519 0.0403077737 -0.0943075221 0.0006564298 -0.0012920855 0.0149207419 -0.0079362377 0.0512507887 -0.0852163592 0.0051578571 0.0570386533 0.0079758840 -0.0228556085 0.0032030152 0.0290181110 0.0083096651 -0.0182221534 -0.0341622296 0.0084806518 -0.0086086555 -0.0304994932 0.0155279038 -0.0168487921 -0.0296679326 -0.0268637025 0.0091463140 0.0335535529 -0.0665440784 -0.0247986346 0.0423628761 -0.0150030204 -0.0451281349 -0.0692708012 -0.0082780211 0.0078184180 0.0209361627 0.0644671878 -0.0059373841 -0.0379899936 -0.0039650912 0.0270225022 0.0645659962 -0.0127050247 0.0095347115 0.0059998055 0.0163893311 0.0006783835 0.0020775235 0.0219462593 0.0204046343 0.0184038607 -0.0262524148 -0.0051677817 0.0042748541 0.0029845227 0.0054524112 0.0251360998 -0.0101677260 -0.0512935741 -0.0995180147 0.0012397406 0.0395061386 0.0970675859 -0.0360555839 -0.0443822266 -0.1210099442 0.0088569140 0.0734326986 0.1821310454 -0.0590120895 -0.0882240655 -0.2452793999 -0.0096370038 -0.0465876135 -0.0745873323 0.0162705210 0.0421513953 0.1057752897 0.0137426869 -0.0156349586 0.0100742451 0.0698592436 0.1454909656 0.3370794679 0.0456292843 -0.0175480499 0.0218665017 0.0033958218 -0.0336062378 -0.0211778708 0.0187632587 0.0283913540 0.0011726814 0.0031959058 0.0315608206 0.0017705849 -0.0430288823 0.0340271681 -0.0107056575 -0.0285240465 0.0211221300 0.0635945308 -0.0331267454 -0.0089886944 -0.0160983377 -0.0136803936 -0.0000899139 -0.0604572161 -0.0493994439 0.0200619966 0.0321814178 -0.0271883116 -0.0098665706 -0.0556059082 0.0023490641 -0.0046422925 0.0019584145 0.0332532194 0.0017615577 -0.0047128720 -0.0141028104 -0.0371123268 -0.0010446989 0.0212918099 -0.0080973658 -0.0038872249 -0.0292969956 0.0127834925 0.0131914707 -0.0086180411 0.0331842037 0.0065659385 -0.0453081442 0.0094738494 -0.0077528105 -0.0349958067 0.0020972992 0.0283151413 0.0014558174 -0.0074240132 -0.0038031504 -0.0100729247 -0.0065840203 -0.0179283344 -0.0024422429 -0.0042664885 -0.0107716921 0.0104799598 0.0093674533 0.0359592375 0.0109439915 -0.0030455882 0.0158550817 0.0151479194 -0.0036077720 -0.0026677225 0.0036951162 0.0018147672 0.0233679507 -0.0172655245 0.0004849076 0.0045304856 0.0175052388 -0.0171472532 -0.0159724725 -0.0557282254 0.0271524280 0.0328200349 -0.0111159534 0.0087339676 0.0119438216 0.0135476089 -0.0237879510 -0.0224830010 -0.0187643479 0.0022958963 -0.0072744428 0.0054529483 -0.0055374161 0.0176196751 0.0031539674 0.0219489751 -0.0124733288 0.0456185714 -0.0679891677 -0.1592940074 0.0874663985 0.0928440829 0.3338025015 0.0605136683 0.1833673004 0.1811694476 0.0005542554 -0.1344638714 0.0635382150 0.0441398303 0.1555282349 -0.0701581392 -0.0787089827 0.1649605551 -0.0593833733 -0.1364526204 -0.0698213258 0.1627371251 -0.0667710389 -0.0305765578 -0.0462881042 0.0278879119 0.2098871404 -0.0713263202 0.0194190066 0.1363058039 -0.3099363528 -0.1199670642 -0.1119309027 0.1680910545 0.0332463177 -0.0580380768 -0.1170412387 0.0690021617 -0.1013238347 -0.0944777974 0.0821705201 -0.1097406335 -0.1200573277 0.0653242449 -0.1108677310 0.0079223478 -0.0418457407 0.1147845980 0.0728037590 0.0626349443 0.0323097519 -0.0023648793 -0.0627464644 -0.0387666421 0.0394656744 -0.0787738891 -0.0058801324 0.0037210884 0.0409538606 0.0611365585 -0.0383946018 -0.0417231451 0.0920626116 -0.0022396814 -0.0823595810 0.0510858507 0.0019680686 -0.0269799862 -0.0500956115 -0.1020982281 0.0080451748 -0.0290883677 -0.1186946062 -0.0421849936 0.1118447484 0.0816027635 0.0784871675 -0.1320708316 -0.0437552062 0.0925126393 -0.2206740070 -0.0528203295 0.0010576024 -0.0072582344 0.0091591767 -0.0173059213 -0.0367219618 -0.0317550020 0.0151808033 -0.0070550605 -0.0140391872 -0.0216213969 0.0387682830 0.0320218764 0.0000692439 0.0001591272 0.0003654347 0.0011094019 -0.0050411297 -0.0012237372 0.0025156203 -0.0007237079 -0.0019701262 0.0021362622 0.0026961670 0.0024628948 0.0412736221 0.0225721440 -0.0022329156 -0.0058086993 0.0211164055 0.0151813439 0.0127781535 -0.0044156097 0.0015145348 -0.0051732216 0.0126942169 -0.0035720394 0.0150284808 -0.0083386985 0.0027410975 -0.0020966128 -0.0032269835 0.0039883748 0.0015301726 0.0056532826 0.0034357026 0.0018431625 0.0101850217 -0.0106635766 -0.0072982765 -0.0079545782 -0.0049433787 -0.0056635043 0.0158692895 0.0164528890 -0.0076153391 -0.0022712845 -0.0017927276 -0.0291972655 0.0373020952 0.0306492039 -0.0187320555 -0.0341358440 -0.0106395217 -0.0262216959 0.0369540998 0.0332931099 0.0041167032 0.0052256341 0.0004423536 -0.0006957385 0.0064981294 0.0048904322 -0.0045612605 -0.0024155065 -0.0021664487 -0.0026822351 0.0028657835 -0.0074999729 -0.0060071467 -0.0056151784 -0.0024099272 -0.0004594518 0.0058403721 0.0004155603 -0.0031640515 0.0018810104 0.0100122000 -0.0011296574 -0.0197413293 0.0029024872 0.0015201557 0.0029475755 0.0025353768 -0.0166157824 -0.0160950240 0.0039619014 -0.0085126571 0.0084868920 0.0073935378 -0.0049903408 0.0025973180 0.0064636227 0.0022574412 -0.0023279746 -0.0076081717 0.0059940171 -0.0079003942 -0.0043780067 0.0045214776 0.0000951305 -0.0066703453 -0.0041384337 0.0046448123 0.0067950399 -0.0204664579 0.0098849556 0.0049684376 -0.0085135633 0.0025935850 -0.0191107845 -0.0038772259 0.0017153715 0.0049548384 0.0136685567 0.0090035677 -0.0106155560 -0.0032873429 0.0195653505 0.0122324761 -0.0004203807 0.0012626479 0.0028939392 0.0069173669 -0.0020254280 0.0001387056 0.0073876420 0.0021662891 0.0062312527 -0.0071876684 -0.0025402879 0.0016696398 0.0029887473 0.0069789732 0.0037653508 -0.0033531108 -0.0095677306 -0.0310131780 0.0062793952 0.0173260120 0.0269564976 -0.0083004279 -0.0148607502 -0.0364743816 0.0140276021 0.0284582729 0.0550676072 -0.0112502419 -0.0340251361 -0.0699482990 -0.0085050680 -0.0102174881 -0.0235682466 0.0005806040 0.0117003601 0.0326073967 -0.0062785856 -0.0002630725 0.0028124134 0.0138325476 0.0389105953 0.1053819936 0.0094390834 -0.0002331137 0.0159443667 0.0030396388 -0.0129387334 -0.0097917844 0.0017317971 0.0186688395 0.0067419268 0.0136794136 0.0081011167 -0.0042879529 -0.0136261605 0.0174128268 -0.0018639305 0.0252653625 -0.0097434493 0.0082222101 -0.0046815696 -0.0086125011 -0.0134848138 -0.0182362711 0.0056851257 -0.0170147333 -0.0035844805 -0.0015009185 0.0000530153 -0.0367445269 0.0062194658 -0.0071419999 -0.0527395818 -0.0506888195 0.0026923182 -0.0983093631 -0.0551948434 0.0083803894 -0.0362479884 -0.0219096677 0.0252630358 -0.0471717007 -0.0522609013 0.0002802381 0.0245411880 0.0002133532 -0.0142809394 0.0237375099 0.0050331027 -0.0120279965 0.0002528097 0.0486848411 0.0206158775 0.0932642858 0.0137650094 -0.0459523123 0.1321974929 -0.0197766853 0.0256624367 0.2539847096 -0.1157707977 -0.0019985366 0.2046704513 -0.1061058579 0.0154528698 -0.0172365427 -0.0832909386 0.0322365115 0.0492703876 -0.0283822035 0.0183601313 -0.0496408310 -0.0260933940 -0.0117339154 -0.0045910906 -0.0765982749 0.0337296864 -0.0767689701 -0.0538532955 -0.0665273490 -0.0909697617 -0.0043626800 -0.0276698591 -0.0592430565 -0.0799423128 -0.1030365020 -0.0001248944 -0.0018509170 -0.0394927764 0.0439346406 -0.0097697136 -0.0233635745 -0.0073099170 0.0043265549 0.0169194461 -0.0198911325 -0.0121959918 -0.0028090542 0.0271977111 -0.0119532342 0.0119419273 -0.0144165253 0.0034667594 0.0067763387 -0.0115057422 -0.0173331716 -0.0028905115 0.0012780288 -0.0065723967 -0.0064469465 0.0024428124 0.0053363642 -0.0016900294 0.0108176059 -0.0090136071 -0.0084667284 0.0029074190 0.0092256986 0.0043563647 0.0026378851 0.0106221401 0.0003777197 0.0036679998 -0.0079132557 -0.0063785861 0.0141099040 -0.0098627001 -0.0029411685 -0.0020735387 0.0109512779 0.0150837664 0.0038597670 0.0102950215 0.0020218632 -0.0052617729 -0.0024961197 0.0072449346 -0.0092792984 -0.0005403913 0.0031479898 -0.0120794321 0.0009800203 0.0102150348 0.0003201276 0.0037989472 0.0011733768 0.0000899181 -0.0042910016 -0.0004142727 0.0001951136 0.0008249286 0.0000674501 0.0045416079 0.0020063884 -0.0016232344 0.0008281182 -0.0005155071 -0.0009648607 -0.0029733023 -0.0021361502 0.0007950450 0.0039169028 -0.0015087733 -0.0025672298 0.0046791419 0.0020132028 -0.0015124727 -0.0016616936 0.0015620760 0.0016008485 -0.0029897660 -0.0015296738 0.0006137228 0.0009690339 -0.0040279489 0.0000494946 -0.0170831468 -0.0003894912 0.0049107377 -0.0191242284 0.0168360591 0.0033300375 0.0003223505 -0.0312592726 0.0017692336 0.0030517198 0.0057945725 0.0046989946 -0.0021961774 0.0008079203 0.0032848248 0.0029191018 -0.0052151038 -0.0049760087 0.0003765930 0.0010512656 -0.0002978174 0.0000600442 0.0015579253 -0.0003706883 0.0001396401 -0.0015124058 0.0012574832 -0.0003223353 -0.0013911189 -0.0015936688 -0.0070052301 -0.0032376325 0.0002984393 0.0007439937 -0.0028132604 -0.0021596213 -0.0035875841 0.0027907326 -0.0018748796 0.0011460489 -0.0026075530 0.0015528611 -0.0030151254 0.0004723759 -0.0025988198 -0.0014131163 -0.0021428299 0.0077924225 -0.0013371019 0.0045020211 0.0015839941 -0.0026162151 0.0024290685 -0.0011148968 0.0009717820 0.0001525864 0.0001115449 0.0006901663 -0.0033140297 -0.0029446864 0.0005798310 -0.0027845947 -0.0020640875 0.0044020473 -0.0054547392 -0.0046965599 0.0030135550 0.0059797114 0.0024287698 0.0044929190 -0.0054815643 -0.0055158716 0.0011664983 -0.0498241462 0.0097302929 -0.0850151063 0.0395123007 0.0193703946 -0.0756937838 0.0761142186 0.0237483615 -0.0845894728 -0.0009868408 0.0527128021 -0.0847968414 0.0529560757 -0.0092167632 -0.1095637440 -0.0095207386 -0.0395324606 -0.1398797756 0.1177057441 -0.0863276098 -0.0611409642 0.1624045337 -0.0295694636 0.0179992328 -0.0283516361 -0.0045800273 -0.0118065566 0.1306575774 -0.0621941879 -0.1106297497 0.0932578505 -0.0794435518 0.0359416067 0.0128397289 0.0386259303 0.0304952519 0.0397344860 0.0267489234 0.0553031519 0.0004571845 0.0235183356 0.0588012199 0.0490789495 0.0073958157 0.0752529014 0.0237672406 -0.0036108764 0.0491688582 0.0889812548 0.0097472985 -0.0047976570 0.0956980679 0.0017612857 -0.0126655923 -0.0121358809 0.0047390008 0.0255829662 0.1023953548 -0.0087933255 0.0747571418 0.1014217206 0.0200068077 0.1002052249 -0.0125284438 0.0056912905 0.0542974898 -0.0328425901 -0.0393452713 -0.0486140612 -0.0118197055 0.0046645478 -0.0422817264 -0.0285250812 -0.0321482497 0.1827777062 -0.0668226661 -0.0175507897 -0.0632302949 -0.0617808867 0.0154621664 0.1048109873 0.1624957152 -0.0711649076 0.0234513338 0.0949684392 -0.0506607334 -0.0247047562 0.1839579989 -0.0287587934 0.1489425523 -0.1402513988 0.0243846564 -0.1623277842 -0.0500641047 0.0490722425 -0.2665639700 0.1137500248 0.0055160876 -0.0376828539 -0.0506857944 0.0528326997 -0.2795809321 0.0991782224 0.0393731506 0.0275008932 -0.0247492275 0.0401211429 -0.0558618434 -0.0466702603 -0.0654280390 0.0512536718 0.0041166735 0.0818623376 0.0989670407 0.0854366668 0.0849975182 -0.0069780325 -0.0026615947 0.0442118790 0.0905245717 0.0746294371 0.1160890433 -0.0216286906 0.0667354340 -0.0800479814 0.0014777420 0.0424042392 -0.0402573643 0.0056328507 0.0931236698 -0.0193364116 -0.0704244930 -0.0847995700 -0.0302535319 0.0088538287 0.0082409481 -0.0011716538 0.0142474306 0.0097138265 -0.0025038711 0.0068505114 0.0046067764 -0.0034652575 0.0076140427 0.0064839951 -0.0021821951 -0.0043372614 0.0000335343 0.0011071415 -0.0056001307 -0.0044262030 0.0004182009 0.0004663359 -0.0061022576 -0.0009553407 -0.0161831648 0.0008530047 0.0024541795 0.0613508940 -0.0014008479 0.0112037711 0.1701485940 -0.0879633398 0.0146187732 0.1214032802 -0.0820758305 0.0214885010 -0.0045830354 0.0208638751 -0.0022211937 0.0026345899 0.0109672084 0.0042967159 0.0303591096 0.0165060281 0.0120974761 0.0066805552 0.0261860429 -0.0279195501 0.1640419139 0.1410918150 0.0801951228 0.1063633252 0.0274567155 0.0513254702 0.2071137126 0.1482393036 0.1091081460 0.0159456259 0.0413552359 0.0387386792 0.0249318494 -0.0268399777 0.0051218305 -0.0169698358 -0.0112856864 -0.0155791090 0.0016740441 -0.0027136210 0.0154158716 -0.0028168146 0.0138132332 -0.0122509637 0.0227279143 -0.0033169369 0.0114945424 0.0161907112 0.0109024890 0.0006348552 0.0004163290 -0.0009044127 0.0030519110 -0.0033626429 -0.0003706103 0.0038613362 -0.0149057921 0.0051708942 0.0080942855 -0.0009085429 -0.0111607074 -0.0063625590 0.0022113404 -0.0079967993 -0.0032606072 -0.0042247696 0.0065588140 0.0084901789 -0.0182422167 0.0080637967 0.0031907369 -0.0014727797 -0.0107788119 -0.0119505897 0.0016296536 -0.0101327190 -0.0046682630 0.0033193871 0.0080320569 -0.0054454158 0.0041751437 0.0013087810 -0.0030839031 -0.0015124032 0.0081038455 -0.0274603082 -0.0011060409 -0.0011785810 -0.0007973056 0.0000887632 0.0013261118 -0.0009866390 -0.0007136488 -0.0016381998 -0.0007539260 -0.0026177560 -0.0005391599 0.0007941039 0.0004539886 0.0010534730 0.0008836586 0.0022404281 -0.0002466443 0.0000534017 -0.0018887971 -0.0009439153 0.0000366009 -0.0036971408 -0.0013904897 -0.0015222842 0.0026989070 -0.0001358088 0.0008125528 0.0027501260 0.0003256692 0.0013821506 -0.0020438942 0.0005286921 -0.0017002775 0.0118050806 0.0019374619 -0.0023290149 0.0102264660 -0.0028793364 -0.0254093711 0.0002019445 0.0586279256 -0.0155382340 -0.0019067691 -0.0170919876 -0.0166559674 0.0003110543 -0.0046910647 -0.0076964961 -0.0117276643 0.0096720719 0.0106869302 0.0026360903 0.0009630846 -0.0006729930 0.0010790482 -0.0032548597 -0.0013208129 -0.0002965566 0.0006004911 -0.0021171826 0.0010101765 0.0036064870 0.0032438496 0.0100197063 0.0083089299 0.0032182440 -0.0034283859 0.0121389607 0.0089308614 0.0063158258 -0.0055410881 0.0018591599 -0.0003303377 0.0007373930 -0.0017358167 0.0035398619 -0.0025310426 0.0003119373 -0.0004742953 0.0003795652 -0.0002361709 0.0002235802 0.0015021952 0.0025254962 0.0037632229 0.0039454577 -0.0057938944 -0.0018972377 0.0007107404 0.0023306176 -0.0017049808 0.0081721108 0.0092462426 -0.0024019430 0.0001860158 0.0010581753 -0.0098306675 0.0161028111 0.0126327805 -0.0079840520 -0.0044548361 -0.0001776385 -0.0104812341 0.0174409321 0.0150991184 -0.0041639561 -0.0370733098 0.0128973592 -0.0428642369 0.0049813918 0.0161262106 -0.0281823171 0.0450929566 0.0034678233 -0.0402324535 -0.0140799276 0.0367379041 -0.0280196645 0.0324401454 -0.0129370996 -0.0495457101 -0.0187323909 -0.0123949681 -0.0603898049 0.0628118796 -0.0534484706 -0.0112287705 0.1216170972 -0.0496009866 0.0045928513 -0.0190378406 0.0000983011 0.0245031234 0.1020411028 -0.0637548952 -0.0380323962 0.0425473951 -0.0484776194 -0.0437609048 -0.0057672361 -0.0681757874 -0.0352432561 -0.0602295935 -0.0254632655 -0.0889882786 0.0166524657 -0.0289147484 -0.0848325472 -0.0754583623 0.0013740271 -0.1038878990 -0.0291010859 -0.0076555168 -0.0369128558 -0.1271248365 -0.0243374138 0.0417862293 -0.1661226510 0.0350449570 0.0178664692 0.0186904200 -0.0169658791 -0.0357884186 -0.1902929969 0.0372622559 -0.0997657370 -0.1702881590 -0.0469988813 0.0446692948 -0.0046977304 0.0003341096 0.0197455204 -0.0123021159 -0.0190084538 0.0607660864 0.0084493607 -0.0133244942 0.0675664608 0.0404851233 0.0441730695 0.1107181054 -0.0515766685 -0.0094844446 -0.0043356659 -0.0394410925 0.0138098511 0.0428396485 0.1053582917 -0.0484696222 -0.0176425811 0.0575101787 -0.0168846603 -0.0340134636 0.1160048970 -0.0274119866 0.0562538463 -0.0779717547 0.0315188155 -0.0690449237 -0.0677476345 0.0533816482 -0.1531579687 0.0530315015 0.0006108935 0.0036449522 -0.0738080660 0.0400383322 -0.1384659799 0.0736030995 -0.0219075415 -0.0224778323 0.0600206353 -0.0459421372 0.1041963668 0.1130995324 0.1288996814 -0.0527318767 0.0486355763 -0.1594821095 -0.1827575005 -0.1416057348 -0.1560388698 0.0560843281 0.0643726252 -0.0824312913 -0.1679352499 -0.1542777190 -0.1583596080 0.0234073866 -0.1424705294 0.1482669468 -0.0191199134 -0.0883450239 0.0456227865 -0.0207656206 -0.1967684111 0.0270752284 0.1285414235 0.1466633219 0.0193277444 -0.0195951524 -0.0164418251 0.0029485228 -0.0448601256 -0.0237629382 0.0098455891 -0.0084385247 0.0043005172 0.0106233194 -0.0214551170 -0.0084280334 0.0090474987 0.0217673002 -0.0055437042 -0.0061612654 0.0186797828 0.0023314905 -0.0013046555 0.0124181308 0.0112467569 0.0048448478 0.0514247123 -0.0047780084 -0.0136927081 -0.0016182666 -0.0073367937 -0.0021797710 -0.0022810558 -0.0057555873 0.0113211852 0.0004928280 -0.0087231145 0.0039582623 0.0023662592 0.0050058019 0.0074385193 -0.0017121605 -0.0037715550 0.0019238767 0.0068421467 0.0035597765 -0.0002223674 0.0069011740 0.0022621032 -0.0006035286 0.0139497988 0.0126697894 0.0034371958 0.0083348030 0.0070401835 0.0030196120 0.0165747852 0.0112976618 0.0021738479 -0.0030179852 -0.0027440213 0.0052303078 -0.0017674462 -0.0027957040 -0.0036455774 -0.0001487074 0.0022389823 -0.0003204217 0.0052142981 0.0004879399 0.0040490520 0.0047707123 0.0028594695 -0.0046250574 -0.1079940542 -0.0063863045 -0.1203953984 -0.0701755318 0.0128822581 0.0346158056 -0.0131539685 0.0629056908 0.0139924074 0.0052430685 -0.0338743892 -0.0319579119 0.0783434204 0.0152176154 -0.0320853082 -0.0096131188 0.0552378133 0.0359645391 -0.0492014487 0.0052042482 0.0373225682 0.0188927261 -0.0196716901 -0.0405538151 0.0985108209 -0.0157968939 -0.0065815107 0.0406568353 0.0347499850 0.0146513238 -0.0430483005 0.0215431472 0.0521251600 -0.0007296966 -0.0671582948 0.0095759088 0.0038741102 -0.0051463876 -0.0022906173 0.0676169914 -0.0725187213 0.1802837500 0.0114723887 -0.0131417631 0.0112699467 -0.0027774531 0.0107618342 0.0193224185 0.0052135312 0.0061394686 0.0090187129 -0.0018945646 -0.0069224050 0.0068444329 -0.0146437688 -0.0054336400 -0.0098358446 -0.0068465406 0.0112345435 -0.0099337591 -0.0087770971 0.0141781282 0.0050577136 0.0039726552 -0.0006283796 0.0185922611 -0.0124928964 -0.0091544405 -0.0273969889 -0.0157341945 0.0033059089 -0.0315883530 0.0103050894 0.0127169730 0.0323224551 -0.0058402861 -0.0275256936 -0.0018996077 -0.0024503686 -0.0052922441 0.0101837249 -0.0010081932 0.0073308991 -0.0015395293 0.0071286284 0.1460304137 0.1496154004 0.0097143701 0.0441665270 0.0712342032 0.1056922391 -0.0785959484 -0.0898914711 -0.0119914937 -0.0060075737 0.0036590323 -0.0345457602 0.0547576497 -0.0112091492 -0.0047375345 -0.0179949900 0.0480536454 -0.0080423448 -0.0459031397 -0.0430339109 -0.0763251794 -0.0687647784 -0.0320129556 0.0295380536 -0.1092490937 -0.0800939995 -0.0465726744 0.0622555161 -0.0194543216 -0.0336430525 0.0354993242 0.0057748383 -0.0637626320 0.0514050497 -0.0281136390 -0.0148673172 -0.0262552745 0.0348987637 -0.0079246321 -0.0191155679 0.0260500157 -0.0224048550 -0.0478763748 0.0778475585 0.0172518292 -0.0229464921 -0.0416488951 0.0143778066 -0.0841313639 -0.0951650722 0.0169797340 -0.0203672584 -0.0272513905 0.0812166037 -0.1386972008 -0.1070478015 0.0667747207 0.0252827166 -0.0053050002 0.0872613415 -0.1504862460 -0.1303532092 0.0023169327 0.0031443309 -0.0002559246 -0.0013434795 0.0040773363 0.0023923682 -0.0034811020 -0.0015215054 -0.0002910655 -0.0012731387 0.0021304597 -0.0038314315 -0.0017487743 -0.0024918390 -0.0021016144 0.0006900493 0.0021989631 0.0004572044 -0.0009320602 0.0020738434 0.0048829263 -0.0022108890 -0.0061958942 0.0008056229 0.0013107508 0.0016717809 0.0003130428 -0.0063649067 -0.0080687162 0.0016574548 -0.0044952866 0.0010868621 0.0060278536 -0.0032614980 -0.0034757902 -0.0053365662 -0.0023288274 -0.0091379220 -0.0019551379 -0.0068273887 -0.0007627355 -0.0025012959 -0.0086897123 -0.0040945318 -0.0016433042 -0.0080982176 -0.0053679906 0.0003223354 -0.0060619196 -0.0103303340 -0.0026767817 0.0011401813 -0.0132102183 0.0010107515 0.0022605394 0.0015177482 -0.0007611989 -0.0055579327 -0.0098486450 0.0000283001 -0.0062435748 -0.0195765989 -0.0020514985 0.0003353749 -0.0001682455 0.0008795088 0.0023143899 -0.0006987724 -0.0001515418 0.0059329042 0.0000066150 -0.0006793728 0.0063976234 0.0032868441 0.0041054756 0.0042794225 -0.0014360687 -0.0021859181 0.0003693223 -0.0007950389 -0.0032604340 0.0032497457 0.0061761876 0.0004302175 -0.0007807645 0.0000010114 -0.0040488371 0.0029074796 0.0086556700 0.0065182685 0.0023483558 -0.0064954757 -0.0031060694 -0.0029968160 -0.0030393084 -0.0001338072 -0.0048448850 0.0019907606 0.0030934386 -0.0010416012 -0.0016132922 0.0035432156 -0.0031209592 0.0053519932 0.0106475695 -0.0012813568 0.0052245169 0.0006446745 0.0074059139 0.0082441393 0.0131893175 -0.0036922757 0.0073817990 -0.0143842925 -0.0155136814 -0.0104746945 -0.0150144956 0.0068100383 0.0064518048 -0.0119718824 -0.0108511708 -0.0153829837 -0.0138463067 0.0014562288 -0.0158499238 0.0133157511 -0.0043340198 -0.0067722084 0.0007111950 0.0022797675 -0.0210788471 0.0035660122 0.0104935475 0.0148589317 -0.0023392124 0.1611877267 0.1325759314 -0.0240258436 0.3957377046 0.2024228795 -0.0897126742 0.0559044341 -0.0630503953 -0.0924619405 0.1860701961 0.0562341423 -0.0833934833 -0.1996365468 0.0572217323 0.0567545636 -0.1401713840 -0.0189255302 -0.0125496489 -0.1467340253 -0.0681587508 -0.0417331038 -0.4298417999 0.0451210648 0.1249020686 -0.0417671497 -0.1564537858 -0.1017249985 -0.1240850192 0.0188727418 0.3005583023 -0.0507389799 -0.0725705424 0.0742807092 0.0719980646 0.0408241776 0.1577547667 0.0097586734 -0.0794118725 0.0400670210 0.0361144366 0.0598842320 -0.0449986630 0.1494942322 -0.0407680297 -0.0081111352 0.0309899517 0.0601416763 -0.0990258570 -0.0874206667 0.1634304361 0.0073560410 0.1207455491 -0.0682874774 -0.2756729083 -0.0737631197 -0.1336295051 -0.0169760096 -0.0756221790 0.0871649047 -0.0523806654 0.0537438530 0.0348326100 0.0335363050 0.0173513933 0.0017395515 -0.0481910772 -0.0104903659 -0.0294568240 0.0341062035 -0.0082512527 0.0042265608 0.0034336160 -0.0072173464 -0.0220976057 -0.0039080434 0.0035458010 -0.0136611762 -0.0055298325 0.0066553693 0.0058949619 0.0039155674 0.0056505592 -0.0113852956 -0.0085832637 0.0017860189 0.0053133408 0.0001723536 0.0071861898 0.0107245330 -0.0024225138 0.0024895794 -0.0046655818 -0.0065944944 0.0085702913 -0.0103020500 -0.0027038081 -0.0106540260 0.0103813491 0.0090940740 0.0042551535 0.0130585178 -0.0065194339 -0.0061830143 0.0030536793 0.0048828890 -0.0059357929 0.0023689771 0.0073304422 -0.0115167586 0.0067970913 0.0074460737 -0.0017731223 0.0077035711 -0.0004043605 0.0008339583 -0.0077093260 -0.0031142497 -0.0020233395 0.0024573146 0.0002498189 0.0071526268 0.0022750477 -0.0045412326 0.0032712618 -0.0027254158 -0.0001389607 -0.0065752547 -0.0024113381 0.0035039119 0.0067032244 -0.0025966801 0.0002828328 0.0090633987 -0.0007259925 -0.0003783893 -0.0014109462 0.0009413401 0.0071497761 -0.0048438582 0.0004579654 0.0076926537 0.0050299931 -0.0054687893 -0.0035663653 -0.0185856487 0.0041216661 0.0026123841 -0.0095239094 0.0007876250 0.0737882787 0.0341504005 -0.0450966025 0.0176835852 -0.0006988912 -0.0070404945 -0.0082665839 -0.0012912875 -0.0019294828 -0.0065088522 -0.0048382003 0.0038718058 0.0053356499 -0.0020704875 -0.0009179090 -0.0006552889 0.0051832584 -0.0068114370 0.0055249454 0.0024198710 0.0021627176 -0.0081464193 0.0002489348 0.0069776682 0.0063500969 0.0048045323 0.0033748654 0.0018262245 -0.0014063253 0.0052409912 0.0039630329 0.0009718153 -0.0078075507 0.0035403624 0.0069534980 -0.0073461736 0.0016738796 0.0111429332 -0.0066992787 0.0085588347 0.0107574156 0.0091209052 -0.0005165579 0.0023195914 -0.0015567720 -0.0118593273 -0.0045811946 0.0088908338 -0.0122902448 -0.0007335504 0.0075621370 0.0113393892 -0.0006295564 0.0083614070 0.0111272129 -0.0000203456 0.0031318234 0.0048454653 -0.0045212568 0.0071232355 0.0056493920 -0.0036312531 -0.0023327995 -0.0004871582 -0.0051125030 0.0080708546 0.0072610921 0.0394981216 0.0586818798 0.0374809911 -0.0491385534 0.1408934243 0.0734553280 -0.1189668481 -0.0331358472 -0.0404556007 -0.0280136564 0.0019924218 -0.0729423731 0.0141157143 -0.0960660524 -0.0570151605 0.0949137310 0.0561462337 0.0568415865 -0.0181187777 0.0988687070 0.1312555009 -0.0769224309 -0.1905839635 -0.0091482924 0.0088284790 0.0172600182 0.0012262793 -0.1039869912 -0.1765522070 -0.0209500648 0.0012551185 0.0809808986 0.1407275492 0.0072470281 -0.0600376082 -0.0117607653 -0.0431164059 0.0414065011 -0.0373997457 0.0166636435 -0.0789868820 0.0093519051 -0.0316131849 0.0401423769 -0.0176345453 0.0153948527 -0.0488034064 0.0148256061 -0.0671504642 0.0350672584 -0.0400858902 -0.1204496561 0.2082490644 -0.0851536831 0.0050870422 -0.0200265501 0.0245047038 -0.1095426782 0.2320156866 -0.0743108228 -0.0616399359 0.0751561164 -0.0326801204 -0.0001040880 0.0005942820 0.0098961024 0.0335882473 -0.0175283971 -0.0061185163 0.0228962662 0.0200810205 0.0050952827 -0.0060620431 0.0116147877 0.0085267685 0.0082161658 0.0090299184 -0.0573172464 0.0175299838 0.0138485492 -0.0577866879 0.0237615363 0.0527403872 0.0115157570 -0.0173364323 -0.0283861870 -0.0349687159 0.0737371447 0.0908135222 0.1095510434 0.0068024948 -0.0572827075 -0.0012737965 -0.0163007777 -0.0140423568 -0.0152987202 -0.0121201341 -0.0064744654 0.0346842442 -0.0295917634 0.0197427387 0.0699045250 0.0102857444 0.0393758742 0.1514511376 0.0028408463 -0.0003309944 0.0766832334 -0.0187508833 -0.0035283837 0.0646306533 0.0008862112 0.0567210219 -0.0257371349 -0.0123176500 0.0119119249 -0.0464868396 0.0511827322 0.0097851747 -0.1016373694 0.0742653261 -0.0632363430 -0.0479671359 0.0011630960 -0.0839319223 0.0403466545 -0.0487514419 0.0084941854 -0.0353669757 0.0986326686 -0.1122394683 0.0235696046 0.0239036086 0.0600352077 -0.0617860812 -0.0087135154 -0.0071554847 0.0010340560 -0.0202361751 -0.0115977496 0.0050012804 -0.0036868193 0.0021988025 0.0044396891 -0.0094265888 -0.0018287131 0.0049765039 0.0099800181 -0.0038105140 -0.0027346049 0.0037152155 0.0062055786 0.0054723879 0.0123593896 -0.0042626486 -0.0022114597 0.0180414454 -0.0054725034 -0.0020636138 0.0008602072 -0.0006960653 -0.0028839146 0.0021179707 0.0030321810 0.0042650738 0.0007929276 0.0015474739 0.0003016727 -0.0000277131 -0.0001850405 0.0020875336 0.0007670881 0.0004590535 0.0006996535 -0.0001738743 -0.0010848976 -0.0009142699 0.0000315037 -0.0013026342 -0.0001004486 0.0018000365 -0.0000947676 -0.0006516979 -0.0026943531 0.0016055730 0.0021937688 0.0062751187 -0.0026558472 -0.0030785972 0.0020550274 -0.0023628619 -0.0026901750 -0.0001400477 0.0032064472 0.0011124332 0.0001707234 -0.0002841575 0.0006388413 -0.0016928087 0.0005627175 -0.0008788267 -0.0000391627 -0.0012314496 0.0014383685 -0.0639328461 -0.0006285000 0.0889053903 -0.0116050459 -0.0311535329 0.0009558296 0.0042749828 -0.0131939807 -0.0100511897 0.0032697872 0.0159367100 0.0008736150 0.0097519338 -0.0150311545 -0.0103015918 0.0052645787 0.0213594428 0.0052636582 0.0127345384 0.0249242797 -0.0011051239 0.0034127421 -0.0073356796 -0.0068919624 0.0141107632 -0.0138814851 -0.0020773785 -0.0098488873 0.0270724841 0.0298121695 0.0197435111 0.0194621257 0.0077611401 -0.0351519001 -0.0266895031 0.0306793155 -0.0524661962 -0.0397687288 -0.0097447829 -0.0532989823 -0.0402384917 -0.0159317182 -0.0979877752 -0.0740443123 0.0378366009 0.1108584658 0.0758370079 -0.0262133381 -0.0492181307 -0.2980311734 -0.0111787795 -0.2635911049 0.1018143901 0.1312067885 0.0790546009 0.3450790996 0.0068638279 0.3071606435 -0.0953585418 -0.1539431522 -0.1837545699 -0.2132886067 0.0387439653 -0.2651229105 -0.0584806045 0.1050530089 0.1956390516 0.2695128098 -0.0697489885 0.3061945296 0.0524891340 -0.1539777092 -0.2422765295 -0.1425325746 0.0993688560 -0.0120376609 -0.0079341099 0.0040656471 -0.0159399754 0.0059030744 -0.0039468155 0.0007487715 -0.0006423013 -0.0018226183 0.0022830619 0.0056178762 -0.0023395626 0.0003527805 -0.0000498114 -0.0004857303 0.0013676407 -0.0025422599 -0.0012399796 -0.0028955224 -0.0011868459 -0.0004559176 0.0029877575 -0.0045419739 0.0014169943 0.0044213630 0.0031795433 -0.0028110977 -0.0009098310 0.0031176629 0.0042157736 -0.0019637556 -0.0000158525 -0.0003787624 -0.0000665383 -0.0001434898 -0.0002959259 0.0041568423 -0.0034313681 0.0008017967 0.0026172849 -0.0022541177 -0.0000724030 0.0073506017 -0.0074646375 0.0014222975 0.0099287550 0.0070583586 -0.0079240942 0.0079641886 -0.0095575676 -0.0035115431 -0.0038806064 0.0084316427 -0.0051535479 0.0019532249 0.0060200060 0.0041291326 0.0009301691 0.0005147348 -0.0011989100 0.0015673658 0.0090726531 0.0074926132 0.0011939102 -0.0005570119 -0.0002786959 0.0002674992 0.0022022954 0.0001221926 0.0009621087 -0.0012163520 -0.0013031441 -0.0003704870 -0.0009540607 0.0035299193 -0.0023396714 0.0036988581 0.0021613802 -0.0036445856 0.0004895300 -0.0040615727 -0.0009232453 -0.0027269483 -0.0003605145 0.0024112891 -0.0026329091 -0.0026795959 0.0039698120 0.0004996776 0.0026183874 0.0003657092 0.0046495269 0.0019838466 -0.0024810552 -0.0016495624 -0.0042222379 0.0011798563 -0.0013322716 -0.0002284378 0.0015949092 0.0001616364 -0.0057268725 0.0035794688 0.0047810851 0.0012480415 -0.0015506720 -0.0020001810 -0.0039998424 -0.0038945501 -0.0011747958 0.0017665535 -0.0003567420 -0.0000749055 0.0018107246 0.0017232320 0.0019875733 0.0034930186 0.0042784927 0.0015082443 -0.0023089739 0.0002094215 -0.0000194810 -0.0048492608 -0.0029943888 0.0006419117 0.0033051949 0.0000426501 0.0003063004 -0.0000813776 -0.0007991188 0.0015926651 0.0038603344 0.0026285348 0.0018036203 -0.0040504694 -0.0033455271 0.0005863437 -0.0001142753 0.0000456773 0.0004396548 0.0015503877 -0.0002550569 -0.0002937744 0.0003470463 0.0000236239 -0.0001567123 0.0002057294 -0.0003531988 -0.0005460892 -0.0004410846 -0.0006842056 -0.0004357930 0.0000258731 -0.0002276437 -0.0007859704 0.0002119345 0.0003166773 0.0001010711 -0.0000836658 -0.0005680445 -0.0003855019 0.0011733538 0.0002085107 0.0009285440 0.0006852691 -0.0001697112 0.0005671290 -0.0000054986 -0.0000291448 0.0002414421 -0.0002820201 0.0004904527 0.0009142434 0.0009629574 -0.0002191495 0.0000467282 0.0006067734 0.0001938263 0.0003783769 -0.0000508265 0.0000270814 0.0009256690 0.0004970351 0.0008971767 0.0004224882 -0.0007510361 -0.0010894271 0.0000733304 0.0001741840 0.0018426247 0.0003344761 -0.0005865775 -0.0018566797 0.0001103808 0.0012252575 -0.0007404947 -0.0000041256 0.0006546728 0.0005207890 -0.0007227519 -0.0004890480 -0.0011594489 -0.0001424059 0.0002202427 0.0019828281 -0.0008525794 -0.0012943323 0.0063072588 0.0095890363 -0.0036322400 0.0077087164 0.0081559014 -0.0027446576 0.0055498984 0.0079767818 -0.0046000990 -0.0002813122 0.0093715329 -0.0025944014 0.0003923024 -0.0008379603 0.0007230048 -0.0066382242 -0.0032287383 0.0047678548 0.0095603141 -0.0080686381 0.0014250395 -0.0038755964 -0.0026187234 0.0037652124 0.0045186734 -0.0599898626 0.0809087307 -0.1758363558 -0.0068522679 -0.0798783371 -0.0727779888 0.0048920537 -0.0353278551 -0.0117530891 -0.1499858682 0.0841995982 0.0723444622 -0.1188472474 -0.0245174204 -0.0986869702 -0.0343732551 -0.0217913735 -0.1015167545 -0.0922735675 0.1429279625 0.0270382201 0.1272983076 -0.0537395922 -0.0131091476 -0.0101157084 -0.0691257814 -0.0052615605 0.1461909489 -0.0362637645 -0.0163695044 -0.0135449905 -0.0573367584 0.0491340096 -0.0240316437 -0.1095649061 0.0246108635 0.0650583438 0.0620282090 -0.0060391932 -0.0193357782 -0.0383236950 0.0318719460 -0.0387431393 0.0396922622 -0.0249416148 0.0070172590 -0.0199715968 -0.0186557099 -0.0173939797 -0.0093322743 -0.0028728642 -0.0070606670 -0.0096132461 0.0074685924 0.0004837060 -0.0012990343 0.0140755439 -0.0109252844 -0.0094580431 0.0033639626 0.0032657467 0.0095973243 -0.0002812381 0.0091927424 -0.0039228951 0.0065989370 -0.0061947967 -0.0079559084 0.0218374491 -0.0182945874 0.0019445566 -0.0011862889 0.0046648381 0.0203970296 -0.0056912068 0.0174326229 -0.0100224234 -0.0023689923 -0.0050854030 0.0081506246 -0.0041303802 0.0056910085 0.0067187006 -0.0036009264 0.0037023619 0.0251826693 -0.0044551979 0.0078763162 0.0036173711 0.0051215392 -0.0084644196 -0.0023026630 -0.0060745273 -0.0039990164 0.0028276202 0.0029624449 0.0043336534 -0.0009597710 0.0052249453 0.0045635928 -0.0029998452 -0.0043391992 -0.0038660020 0.0000656807 0.0003482903 -0.0078226079 0.0019518320 0.0054611226 -0.0055567583 0.0036540422 0.0013384313 0.0075334436 0.0020703976 -0.0038070523 0.0063652674 0.0015996105 0.0048318395 -0.0099979945 0.0017529902 -0.0247614375 0.0100392117 0.0036220225 -0.0195926621 0.0095294232 0.0524523024 -0.0357029658 0.0106587341 0.0224327823 -0.0027601129 0.0008552327 -0.0023664565 -0.0006827997 0.0016165845 -0.0096118680 0.0013392841 0.0014583073 0.0042861868 -0.0139313483 -0.0057843624 -0.0001943944 0.0173088387 -0.0219446177 0.0099310634 0.0032574285 0.0089548468 -0.0282176296 -0.0019472141 0.0198998455 0.0192179966 0.0083420549 0.0011698793 -0.0003688584 0.0002665231 -0.0007243762 -0.0002964454 0.0085054745 -0.0186852737 0.0042730294 0.0205800357 -0.0237109239 0.0037288065 0.0303292633 -0.0318759877 0.0093967008 0.0104822407 0.0160241943 -0.0186982902 0.0015114247 0.0208766616 -0.0202685846 -0.0021334617 0.0289941360 -0.0442659197 0.0015630711 0.0285700916 0.0373250002 0.0011647386 0.0142613218 0.0213816927 0.0036564223 0.0152278164 0.0192061246 -0.0036196533 0.0020778296 0.0022532764 -0.0020986391 -0.0087753277 -0.0052085689 -0.0043504795 0.0031444716 0.0039521129 0.0137509817 -0.0109159215 -0.0537733294 0.0915219629 -0.0381588797 -0.0890778968 0.0914291414 -0.0204724409 0.0998946810 0.0019238321 0.0868867123 -0.0099305571 -0.1240177491 0.0419423441 0.0956545603 -0.1259916026 0.0468638701 -0.1160399140 -0.0048039887 -0.1127108684 -0.0424133407 0.0199904821 -0.1244874518 0.2256429089 0.0095718808 0.0245712531 -0.0056824569 -0.1203232426 -0.0932413243 0.2298918492 -0.1383969428 -0.0026073595 -0.0834655820 0.0451018864 0.0720063747 0.0989953845 0.1098280454 0.0259655820 -0.0085747761 0.0215484334 0.0333570101 -0.0298370826 -0.0174744078 -0.0454208006 -0.0780445361 -0.0772800041 -0.0193309470 0.0224305869 0.0466839149 0.0493260610 0.1069165942 0.1066385639 -0.0469082128 -0.0309016632 0.0001355528 0.0026329108 -0.0089399770 0.0317762606 -0.0792420617 -0.0714453641 -0.0320699540 -0.0193221200 0.0737977327 0.0164972025 0.0012772736 0.0186012633 0.0216609902 -0.0088007938 0.0048852383 -0.0177675967 -0.0095080342 -0.0061827876 -0.0045055755 -0.0117749171 -0.0190829061 -0.0552603526 0.0202549564 0.0028798843 -0.0981376717 0.0251507680 -0.0051773428 0.0371903148 -0.0830720354 0.0651119882 0.1071745138 -0.0292726969 -0.0499432470 0.0446104469 -0.0720433367 0.0903027941 0.0724819775 0.0084388624 -0.1057329961 -0.0588479993 0.1503936944 -0.0839911330 0.0386844122 0.0307016346 0.0208541315 -0.0759438198 0.1519772770 -0.0831170264 -0.0486923764 -0.0868854817 0.1499946963 0.0781872967 0.0124517346 0.0570732447 0.0729942663 0.0056963554 0.0458334757 0.0639857959 0.1304271678 -0.0567898606 -0.0487258603 0.0136534095 -0.0396305981 0.0058587632 0.1604828093 -0.0172439557 -0.1118974944 -0.0304451533 0.1236764684 -0.0348884149 -0.1079781914 0.0892098117 -0.0179812015 -0.0442635199 -0.0683275068 -0.0970864380 -0.0676468079 0.1423235817 0.0185951750 0.0732242949 -0.0605593423 -0.0019152391 -0.0014455589 -0.0003876804 0.0012819223 -0.0041577146 0.0014978228 -0.0043385142 -0.0066334738 0.0010655139 0.0045497095 0.0021041663 0.0008193099 -0.0026526550 0.0021506099 0.0005884857 -0.0076891893 0.0043921770 0.0050646710 -0.0007083329 0.0010109158 0.0007948517 0.0034159598 -0.0019002832 0.0046410439 0.0467772630 0.0323850261 -0.0539943954 0.0681458608 0.1286957646 0.0186836539 0.0186538441 0.1119241169 -0.0298845694 -0.0298053424 -0.0656791247 0.1059070738 0.0531868870 0.0086526168 0.0285746323 -0.0307383088 -0.1033581025 -0.0384017335 -0.0332528806 -0.1146020649 0.0332853959 0.0721193570 0.0095523566 0.0176314458 -0.0545260350 -0.0360764835 0.0637067110 0.1877914699 -0.0126631245 0.0276501103 0.0429460609 0.0268380649 -0.0814301808 0.0564362346 -0.0230245824 -0.0088066648 -0.0506575639 0.0141291626 0.0082410294 -0.0323289239 -0.0223787116 0.0245680524 0.0334379115 -0.0041893051 -0.0138611550 0.0030997342 0.0021133658 0.0035169531 0.0018685747 0.0031157994 -0.0043528708 -0.0026962238 0.0010917475 -0.0059304906 -0.0031941325 0.0008731107 -0.0010055656 -0.0021382812 0.0001274435 0.0031111475 0.0029621083 -0.0021780979 0.0031131018 -0.0018661607 -0.0007754623 -0.0019427390 -0.0005587011 -0.0024562623 0.0056818395 -0.0011658190 0.0005616350 0.0051565681 0.0060241007 -0.0039069560 0.0088435388 -0.0017490818 -0.0030243863 -0.0027091892 0.0029905461 0.0022021740 -0.0005365139 0.0015529552 -0.0016598001 -0.0027558130 0.0022816522 -0.0017217215 -0.0083111606 0.0035689054 -0.0018363211 -0.0017220935 -0.0036981039 0.0019018177 0.0016469897 0.0035028734 0.0063479570 -0.0007631721 0.0033213226 -0.0032133115 -0.0015075742 -0.0033910430 -0.0072986105 0.0008002050 -0.0033034451 0.0029220930 0.0022406066 0.0029915327 0.0065107673 -0.0020462637 0.0021600931 0.0040754273 -0.0032476410 -0.0036769278 -0.0074131060 -0.0009258862 -0.0039112748 -0.0035087848 0.0005841393 0.0019224558 0.0059955548 -0.0021942570 -0.0024086387 0.0015756299 0.0018496138 -0.0085937243 0.0122950749 -0.0541823771 0.0224159453 -0.0081446704 -0.1065783703 0.0012807344 -0.0001988175 -0.0002945560 -0.0000799210 -0.0008853494 0.0015765180 -0.0005315440 -0.0006477119 -0.0004524006 -0.0000044673 -0.0000254306 0.0008258274 0.0001588168 0.0001662937 -0.0041565609 0.0002093210 0.0001913779 -0.0010898932 -0.0000599853 -0.0000320337 0.0001430272 -0.0007974523 0.0000133816 -0.0000047433 -0.0001455674 0.0006187755 0.0003356603 0.0066115561 -0.0048075977 0.0019787133 -0.0019883414 -0.0003122812 0.0030280909 -0.0029442377 -0.0008178539 -0.0063760481 -0.0039045040 -0.0033244075 -0.0068725347 -0.0007970824 0.0069489368 0.0029656964 0.0031440874 -0.0012049988 -0.0005766354 0.0001717393 -0.0000895200 -0.0007869266 0.0000052735 -0.0001703251 -0.0004703174 -0.0000482314 0.0007571842 0.0004613703 0.0000771348 0.0002680976 -0.0000176878 0.0000806329 0.0009748748 0.0007704302 0.0003295565 0.0000620840 -0.0001473001 0.0126676261 0.0067708143 0.0187025626 -0.0396666755 0.0461669060 0.0390125628 -0.0566271556 0.0056887076 -0.0227559511 -0.0176382466 -0.0129672684 -0.0097829620 0.0235452999 -0.0304066087 -0.0353816545 0.0389735640 -0.0032010180 0.0284783298 -0.0146411914 0.0771675532 0.0140124840 -0.0277604426 0.0071158279 -0.0536521504 0.0008573341 0.0000123339 -0.0022696087 0.0131559649 -0.0084116386 -0.0611242916 0.0236890608 0.0342611613 0.0286229277 -0.1066598287 -0.0742170218 -0.2203264297 -0.2049601185 -0.1004587230 0.1185745124 -0.0319905662 0.0491024585 0.0905499167 0.1343952863 0.0855221901 0.2184838247 0.2388795988 0.1338363477 -0.1308478451 0.0436531880 -0.0526201155 -0.2391193164 -0.1067979050 -0.1227403963 0.2290348820 -0.0087983378 0.0248887160 -0.0152920867 0.0457177400 -0.0684054804 0.2773360652 0.2039480536 0.0666729410 -0.1912228575 0.0079308386 -0.0030757282 -0.0000216736 0.0068586859 -0.0075463355 -0.0071035243 -0.0306499789 -0.0178108848 0.0138845388 -0.0025180725 -0.0120135751 0.0071269280 -0.0618569309 -0.0253217703 -0.0083825320 -0.0860600688 -0.0130574399 0.0004005270 -0.0151971056 -0.1083838590 0.0570433862 0.0618260201 -0.0110165402 -0.0272265247 -0.0358406311 -0.0800576298 0.1257835790 0.0216097803 0.0858692623 -0.0204338291 -0.0235331161 0.1068175050 -0.0489527233 0.0396987932 0.0256294498 -0.0080019303 0.0060326940 0.1266063368 0.0063122529 -0.0089970260 -0.0359456967 0.1045360326 0.0332703755 0.0387965019 0.0174402353 0.0281408507 0.0457399705 0.0260018740 0.0490741171 0.0927640569 -0.0324198056 -0.0367822173 -0.0020022041 -0.0107646248 0.0963544977 0.0936409853 -0.0152586219 -0.0308665481 -0.0578568181 0.0733728839 -0.0328007235 -0.0418980203 0.0274615471 -0.0172070345 -0.0389686922 -0.0382329965 -0.0500310550 -0.0508269366 0.0024998185 0.0352272944 -0.0154962371 -0.0609180636 0.0016674253 0.0013459145 -0.0000797664 -0.0000677887 0.0014343660 -0.0000215472 0.0025236328 0.0027609994 0.0006404095 0.0011044309 0.0012369636 0.0000207444 0.0005197184 -0.0010685371 0.0001609743 0.0019982449 -0.0028797361 -0.0016934901 -0.0010420446 0.0023200549 0.0039239644 0.0010414124 0.0021939714 -0.0044409937 0.0575418106 0.0610706021 0.0658258842 0.0399139566 0.0431358571 -0.1642527792 0.0235975920 0.0956973904 -0.0292223596 -0.0146678904 -0.1103863315 -0.0363350236 0.0630690534 0.0328005390 0.0844989183 -0.1067159994 -0.0559449422 0.0353054103 -0.0654731207 -0.0881729444 0.0039325590 0.0144462879 0.0278059329 0.0314159049 -0.0275857254 -0.0652658349 0.0146658660 0.0761442350 0.0414161891 0.0787585808 0.0450058287 0.0758542637 -0.0249588134 0.0655636566 -0.0104126364 -0.0209503208 -0.0246962365 -0.0328488664 -0.0043022260 -0.0329285655 -0.0090819587 0.0190036625 0.0283466532 0.0043661622 0.0025960538 0.0087168591 -0.0056205112 0.0067787141 -0.0048443079 -0.0023929024 0.0007372789 0.0005696014 0.0006451458 0.0011504467 -0.0009728219 -0.0027535324 -0.0000466266 0.0052574095 -0.0003941231 -0.0036686167 -0.0001958421 0.0021499623 0.0010781891 -0.0041177891 -0.0011957252 0.0025008544 0.0008120956 -0.0037316071 -0.0021752837 0.0045570994 -0.0002516995 -0.0052581203 0.0012410999 0.0017016795 -0.0028891677 -0.0045504425 -0.0015127043 0.0015205517 -0.0005969711 0.0000154642 -0.0021825946 -0.0001226137 0.0030692962 0.0011877238 -0.0038162740 0.0064145077 -0.0023024739 -0.0013672229 0.0031794255 0.0004882850 0.0009567411 -0.0032674411 -0.0014825992 -0.0025025065 0.0002618939 0.0007249080 0.0021758767 0.0007774063 -0.0009581548 0.0019367195 -0.0005562052 -0.0000125035 -0.0032076178 -0.0008132152 0.0017774058 -0.0000029341 -0.0013667093 -0.0007477753 0.0015407270 -0.0014527961 -0.0024343926 -0.0004192406 0.0008226789 0.0002369588 -0.0029998310 0.0023957786 0.0023983041 0.0020279076 -0.0021075390 -0.0032851778 -0.0048237402 0.0005608898 0.0018960096 -0.0052775616 0.0145541573 -0.0179655655 -0.0498429381 0.0140405204 0.0232774959 0.0008931184 -0.0012913680 -0.0010522362 -0.0014121319 -0.0003707313 0.0018564700 -0.0013588955 0.0003884366 -0.0006439712 0.0065050315 0.0036893274 0.0015411524 -0.0057297128 0.0097307135 -0.0037975770 -0.0018065748 -0.0022446463 0.0124280622 0.0011101606 -0.0118172782 -0.0110220534 -0.0041943048 -0.0007148814 0.0012330377 -0.0002266903 0.0013148194 0.0008281029 -0.0107273461 0.0102983892 -0.0041167220 -0.0044348083 0.0034150995 -0.0004269597 -0.0170229594 0.0142833277 -0.0059299000 -0.0131724320 -0.0109630089 0.0069890744 -0.0040315154 0.0020682214 0.0019026011 0.0013452614 -0.0150333301 0.0224754047 -0.0011467856 -0.0174409159 -0.0228252935 -0.0010101831 -0.0078921692 -0.0130766580 -0.0024284849 -0.0079993996 -0.0106397591 0.0017917766 -0.0004543272 -0.0008749028 0.0008008437 0.0055232376 0.0029015469 0.0016860747 -0.0002722481 -0.0009504531 0.0288438651 0.0357938030 0.0599591998 -0.1665535655 0.1997146882 0.1044084203 -0.2553873209 -0.0023613714 -0.0920439350 -0.0336287135 -0.0370574169 -0.0529518553 0.1529529812 -0.1629361863 -0.1245200829 0.2238621125 -0.0145033221 0.1030151789 -0.0976513022 0.2470505153 0.0784685335 -0.1972322937 -0.0688328307 -0.1212650241 -0.0008636157 0.0000598105 -0.0205395841 0.0925138330 -0.1521425716 -0.1572637200 0.1653081916 0.0246532068 0.1452822542 0.0772813789 0.1172496666 0.1390289589 0.1760840614 0.0421992742 -0.0024266347 0.0259329080 0.0599254672 -0.0380349706 -0.0393245716 -0.0782328142 -0.1193825049 -0.1224117304 -0.0299746624 0.0134557435 0.1047223199 0.0762582606 0.1510944214 0.1911601928 -0.0821270924 -0.0164090296 0.0035463521 0.0008557057 -0.0171812009 0.0302166325 -0.1741199985 -0.0940335768 -0.0432211933 -0.0734261881 0.0884039409 0.0141301356 -0.0186885387 -0.0148831868 -0.0043489587 -0.0201891354 -0.0221365792 -0.0301052074 -0.0171938837 -0.0148624035 0.0013832872 -0.0145957490 -0.0302635870 -0.0372962617 0.0015520157 0.0107383148 -0.0501449242 -0.0038570202 0.0115831448 -0.0166369464 -0.0711923095 0.0075758322 0.0333435334 0.0045237234 0.0190545769 -0.0297848117 -0.0724778373 0.0034210809 0.0135449086 0.0628032501 0.0366790086 -0.0158074287 0.0764260722 -0.0001745515 0.0087305539 0.0047230132 -0.0311444057 -0.0083240049 0.0785117734 0.0054086181 -0.0338160224 -0.0593265931 -0.0387530766 0.0051974146 0.0199264685 -0.0248632048 0.0291478911 0.0370341466 -0.0096443248 0.0023386336 0.0263024784 0.0000015584 -0.0007857317 -0.0230077803 -0.0023022759 0.0037132649 0.0510157354 0.0493441294 -0.0111663356 -0.0218602355 0.0119019153 0.0095194734 0.0058079305 -0.0001554561 0.0035653054 -0.0166987108 0.0269892124 -0.0401886739 0.0055655094 -0.0197566032 -0.0212255053 -0.0000875842 0.0437599971 -0.0005602975 -0.0001805883 0.0002696884 -0.0037208479 -0.0009470416 0.0011158864 0.0011371235 0.0030425220 0.0008004587 -0.0016014756 0.0004360104 0.0008631374 0.0034052383 -0.0003837051 -0.0015389899 0.0031424391 -0.0051782292 -0.0031451615 -0.0004352564 0.0049424669 0.0022720566 0.0079136178 0.0005353361 -0.0040445414 -0.0070164232 -0.0012484614 0.0160172520 -0.0129636888 -0.0202087677 -0.0126963531 -0.0039427225 -0.0142191379 0.0040303670 0.0029101130 0.0113348879 -0.0076230143 -0.0030923140 0.0035530145 0.0046122025 -0.0002964082 0.0009979357 0.0029622683 -0.0137748027 0.0153114019 -0.0061375591 -0.0014899144 -0.0076739323 0.0116518323 0.0147888613 -0.0144819305 0.0000974982 -0.0122525310 0.0073612494 0.0320896430 0.0039457523 0.0105573678 0.0043334392 0.0029594686 -0.0071126970 -0.0097160371 -0.0019712711 0.0017822167 0.0019045663 0.0019706525 0.0011960231 0.0040146626 0.0055230022 0.0005864344 -0.0031732077 -0.0554387449 -0.0176731587 -0.1014041125 -0.0488988742 0.0059613161 0.0255581342 -0.0176714738 0.0356791067 0.0117821927 0.0109359987 -0.0363198068 -0.0260147292 0.0585958268 0.0067245817 -0.0274906411 -0.0138743462 0.0068062921 0.0204385502 -0.0367725457 -0.0141498990 0.0149077652 0.0287389456 -0.0020320790 -0.0339513529 0.0758799667 -0.0425200786 -0.0169373296 0.0285237449 -0.0109252688 0.0002126797 -0.0374801118 0.0171015057 0.0268586222 -0.0004387029 -0.0438814801 0.0055681292 0.0133721443 0.0404800087 0.0278561208 0.0276799014 0.0202795632 0.1384076600 -0.0233672596 0.0374615633 0.0153298288 0.0229525677 -0.0391634345 -0.0109996142 -0.0390981539 -0.0123957622 0.0183160197 0.0156995871 0.0138295986 -0.0053868160 0.0231582189 0.0116256698 -0.0150115389 -0.0351313901 -0.0101359059 0.0071759709 -0.0084010090 -0.0306019376 0.0203259686 0.0311829262 -0.0393943671 0.0237473463 0.0033431996 0.0273096176 0.0160083927 -0.0300433657 0.0439657113 0.0215547859 0.0390199456 -0.0380518859 0.0091219847 0.0008585558 0.0083217849 0.0038226251 0.0060284467 0.0261195578 0.0138694480 0.0011045189 0.0025429767 -0.0029888945 -0.0114033769 0.0197463851 0.0193885160 0.0194890500 0.0089961031 -0.0303284186 0.0180052664 -0.0043553946 0.0082684249 -0.1109654195 -0.0470287734 -0.0239759007 0.1200399157 -0.1750856118 0.0578856167 0.0064351979 0.0587881839 -0.1879467386 -0.0229785781 0.1674333925 0.1613773700 0.0666154435 0.0086904187 -0.0187953593 0.0044841697 -0.0203286613 -0.0133413092 0.1430281854 -0.1380916813 0.0326064522 0.1153322602 -0.1185826604 0.0088368450 0.2572856285 -0.2727745205 0.0549624178 0.0709543201 0.1095042642 -0.1660440605 0.0255131958 0.0732424979 -0.0057993901 0.1105930792 0.2077383073 -0.3438144753 0.0289568205 0.2636235309 0.3209485237 0.0159934977 0.0990741507 0.1503099046 0.0430893576 0.1453990999 0.1733914956 -0.0247479732 0.0056185240 0.0119723844 -0.0118032662 -0.0851297493 -0.0470479097 -0.0261911603 0.0032724293 0.0148224413 -0.0023851335 0.0011967200 0.0068460038 -0.0113134220 0.0139916756 0.0043089973 -0.0187140479 -0.0045766634 -0.0061443128 0.0005435959 -0.0057845546 -0.0023493383 0.0143520443 -0.0139984649 -0.0068600497 0.0206950485 0.0008175390 0.0076072564 -0.0012823239 0.0191158911 0.0022566552 -0.0174192803 -0.0090681816 -0.0054120313 0.0002263686 -0.0018067143 -0.0007660123 0.0064092011 -0.0191788904 -0.0046738964 0.0179533538 -0.0018023731 0.0112419752 -0.0083367416 -0.0018073884 -0.0105955403 -0.0091822931 -0.0094192448 0.0035023487 -0.0045456811 0.0034017484 0.0011346118 0.0050606554 0.0008412675 0.0095776469 0.0056881301 0.0073989858 -0.0028978612 -0.0038135748 -0.0088114353 -0.0084773785 -0.0008523639 -0.0197023470 0.0106059444 0.0002024908 0.0019137532 -0.0003943923 0.0094349558 -0.0140934369 0.0141026559 0.0087697488 -0.0046291206 -0.0032227470 -0.0014888222 -0.0013736708 -0.0026495699 -0.0030575170 0.0009133438 -0.0005824788 0.0009654553 -0.0001574940 0.0009160913 0.0007900077 0.0001912453 0.0017519182 0.0081461131 0.0033181016 -0.0021317285 0.0099147208 0.0003633371 -0.0021486585 0.0048752333 0.0162909918 -0.0054238510 -0.0061043326 0.0003119285 -0.0008911570 0.0099454330 0.0169623474 -0.0036590269 0.0007636880 -0.0127989426 0.0022582700 0.0020220621 -0.0144176081 0.0037565456 -0.0051200618 -0.0020269415 0.0030824996 0.0005607061 -0.0142294501 0.0041445697 0.0025238541 0.0091192164 0.0010598987 -0.0088513091 -0.0012318135 -0.0150146224 -0.0002859805 0.0044326550 -0.0109211953 -0.0064990310 -0.0209759954 0.0031210419 -0.0003266937 -0.0056909844 0.0058542576 -0.0091626773 -0.0160639954 0.0123072725 -0.0125178302 0.0128315718 -0.0071774515 0.0028555671 0.0197338944 -0.0100466512 0.0101334144 0.0002138030 0.0114373805 -0.0103951908 0.0201167172 -0.0144871183 -0.0009486332 -0.0110387889 0.0146024140 0.0152291061 0.0101434929 -0.0054783156 0.0738417096 0.0166084477 -0.0137321110 -0.0139952799 -0.0459770466 -0.0154677086 0.0407386522 0.0050777182 -0.0142429794 -0.0541262017 0.0187257471 0.0181250861 -0.0497778914 0.0287966079 0.0193248193 -0.0500018519 0.0080419161 0.0071073021 -0.0658282366 0.0077951461 0.0364242481 -0.0704821685 -0.0931694279 0.1620879216 -0.2844907385 -0.1675755644 -0.0728729014 -0.1031899596 -0.1362712026 0.0324493865 0.0628847927 0.0213961161 -0.0050351213 0.0320823024 -0.0693662199 0.0042822692 -0.0523978265 0.0076154317 -0.0010605203 -0.1679026012 0.0923991644 0.0449361646 -0.0116639263 0.0208795345 0.0356180186 0.1062055392 -0.1033724019 -0.0602689122 -0.1429270620 0.1474054283 0.1904347116 0.0055357449 0.0373684007 -0.0088021136 0.0190719593 -0.0174028550 -0.1375927009 0.0278818722 0.0528597378 0.0523123002 -0.0008602716 -0.0110575173 -0.0341879405 0.0236997547 -0.0277593125 0.0412046617 0.0040321244 -0.0212108864 -0.0159738929 -0.0291960700 -0.0077862805 0.0005300322 -0.0085144434 0.0079362496 -0.0030023578 0.0086868276 -0.0154445472 -0.0064808373 0.0290425812 -0.0035944620 -0.0158924942 -0.0020021158 0.0022445878 0.0138403779 -0.0167187735 -0.0017353268 0.0025260707 0.0160606011 -0.0057251189 -0.0132050603 0.0360754922 -0.0227521136 -0.0112774746 0.0094671773 -0.0027622828 0.0083784987 -0.0228457911 0.0155664761 -0.0007489405 -0.0024246220 -0.0149235381 -0.0001611005 -0.0010124595 0.0194886993 0.0117586500 -0.0170791138 0.0317636315 0.0229096838 -0.0137949181 0.0228005881 0.0089174942 0.0135755650 -0.0239596568 -0.0089553472 -0.0221668149 -0.0085117860 0.0085568804 0.0088952545 0.0107498884 -0.0029670244 0.0161084759 0.0105962423 -0.0054562113 -0.0173626117 -0.0083986716 0.0056126769 -0.0049130255 -0.0192686729 0.0037045217 0.0103445472 -0.0199600280 -0.0028671069 -0.0002883487 0.0216526857 0.0055912757 -0.0157253898 0.0244550916 0.0108220430 0.0144968014 -0.0241860398 -0.0066576582 -0.0159863720 0.0130635831 0.0004204052 -0.0076116983 0.0118671234 0.0616531487 0.0101437797 -0.0042410426 -0.0131658203 0.0000617590 -0.0093297249 -0.0146267958 -0.0107543209 0.0005015112 -0.0092551006 -0.0067009358 0.0035231561 0.0047783798 0.0260900253 0.0107751976 0.0083620739 -0.0252634950 0.0399217434 -0.0121945788 0.0015708541 -0.0107248558 0.0379599747 0.0070049728 -0.0385600186 -0.0369837858 -0.0131065860 -0.0011764371 0.0088798192 -0.0019592320 0.0091884509 0.0067541885 -0.0397578352 0.0256129071 -0.0050808797 -0.0205462114 0.0170175154 0.0012379313 -0.0634437450 0.0681200655 -0.0102734047 -0.0163457696 -0.0236917279 0.0353583769 -0.0075299125 -0.0043976299 -0.0202289693 -0.0370237527 -0.0484932211 0.0801745041 -0.0096120412 -0.0661961960 -0.0780225587 -0.0054007844 -0.0168936202 -0.0286366373 -0.0127856703 -0.0347761491 -0.0414019346 0.0035571208 0.0032380958 0.0006200819 -0.0000260984 0.0216979760 0.0108004256 0.0016959536 0.0072115790 0.0033840820 0.0024215434 0.0106476647 0.0106684386 -0.0073833373 0.0903004632 -0.0295236319 -0.0695417570 -0.0440585626 0.0152945453 0.0107931372 0.0464206260 -0.0554530826 0.0179511557 -0.0798864933 0.0127223232 0.0732561015 0.0474786138 -0.0216074309 -0.0248344528 0.0287295884 0.0316943896 -0.1083975321 -0.2043697983 0.1327765873 0.0047982939 0.0239686851 -0.0179778194 -0.0501683589 -0.2171406604 0.1238039500 0.0344056884 -0.0067216839 0.0390459316 -0.0615651026 -0.0000985468 -0.0598152568 -0.0590630105 -0.0661279288 0.0282741343 -0.0244920541 0.0338099945 0.0059517198 0.0532853509 -0.0005063651 0.0726574130 0.0401564758 0.0691811843 -0.0173106386 -0.0351431213 -0.0348418909 -0.0489255273 -0.0127373852 -0.1419468942 0.0626905707 -0.0090290484 0.0248567029 -0.0106092297 0.0857936599 -0.0976576933 0.1022302707 0.0469642111 0.0320246243 -0.0208491601 -0.0028600392 -0.0089678970 0.0002830835 -0.0020172446 -0.0089746228 0.0015430611 0.0025072539 -0.0048738045 0.0092305691 0.0002528722 -0.0047689136 0.0107216147 0.0433255065 0.0685685102 -0.0392043714 0.0787390179 0.0321903876 -0.0303911018 0.0572125123 0.1431993116 -0.0301365198 -0.0386112383 -0.0261058921 -0.0196037445 0.1506944054 0.1504427038 -0.0085273987 0.0140553349 -0.1407431927 -0.0153223792 0.0036037022 -0.0811693062 0.0011675612 -0.0204666299 -0.0261968214 0.0458328594 -0.0531481575 -0.0788281577 0.0011396554 0.0257196000 0.0449169003 0.0669512164 -0.0296791003 -0.0133416305 -0.0754941036 0.0381606408 0.0214404908 -0.0663964336 -0.0142857062 -0.1039346327 -0.0041420327 -0.0239878790 -0.0266399411 0.0280743983 -0.0820466999 -0.0512040463 0.0796280390 -0.1643522354 0.1029731642 0.0158100075 0.0024825095 0.0968807198 -0.0287386588 0.0740017558 -0.0159883374 0.0469288484 -0.1383486915 0.1326357470 -0.0150728396 -0.0010947095 -0.0400198108 0.0804825437 -0.0128694621 -0.0100155547 0.0015857731 -0.0371760277 -0.0208071092 0.0112009286 -0.0034673826 0.0064888313 0.0108944166 -0.0116076844 0.0019703004 0.0100848086 0.0214245115 -0.0061289442 -0.0075250186 0.0100598197 -0.0046951832 0.0009007914 0.0236952243 -0.0017769013 0.0007675882 0.0395097254 -0.0061323035 -0.0118244180 -0.0125371261 -0.0172941521 0.0325280702 -0.0535811276 -0.0324059011 -0.0165928117 -0.0192089543 -0.0254583588 0.0060177622 0.0114135438 0.0013366651 -0.0023152187 0.0069415166 -0.0131109336 0.0018286478 -0.0113512031 0.0016195924 -0.0000596652 -0.0326816028 0.0165061821 0.0094002902 -0.0017016390 0.0053812599 0.0050182977 0.0172903067 -0.0171570205 -0.0110662439 -0.0232636077 0.0267495681 0.0314224629 0.0047130144 0.0044869597 -0.0032683607 0.0041850753 -0.0001402620 -0.0270264817 0.0057164988 0.0096763712 0.0108114932 -0.0019137594 -0.0018479876 -0.0055895635 0.0089164985 -0.0034328289 0.0108117002 -0.0433294117 0.1700347240 0.1242492452 0.1513274149 -0.0427298869 -0.0839941677 0.0546807982 -0.1203605262 -0.0617834562 -0.0357785663 0.1330532794 0.0732186995 -0.1819798284 -0.0375274164 0.0891330370 0.0545187867 -0.0025695300 -0.0506762495 0.1300878273 0.0681889769 -0.0497801986 -0.1069802205 0.0022681443 0.0936220746 -0.2035171908 0.1171005301 0.1193176934 -0.0890131161 0.0559734397 0.0554080975 0.1323930150 -0.0403419916 -0.0926706923 0.0078476849 0.1244032139 0.0231745287 -0.0195916290 -0.1431981506 -0.0778326432 0.0645828825 -0.2026728162 -0.2031382893 0.0974703607 -0.1507677739 -0.0619916854 -0.0937713398 0.1581549224 0.0598325533 0.1607970870 0.0620447071 -0.0621300888 -0.0545099963 -0.0694732676 0.0161290205 -0.1078159925 -0.0731220952 0.0407698098 0.1207009838 0.0524021598 -0.0377203498 0.0502191790 0.1310723664 -0.0357148938 -0.0704641566 0.1457602171 0.0037664337 -0.0026233368 -0.1467453910 -0.0464414325 0.1068793709 -0.1786077081 -0.0803058218 -0.1074301615 0.1602177706 0.0321074070 -0.0298557175 -0.0374097901 -0.0008658245 -0.0341353727 -0.0775789723 -0.0237203922 0.0004220041 -0.0004023011 -0.0008564959 0.0018341523 0.0332439592 0.0509655971 0.0274073641 -0.0027864906 0.0494194221 0.0246409693 -0.0097522177 -0.0210322407 -0.0461614899 -0.0207643768 -0.0082791521 0.0374082793 -0.0590827889 0.0227137663 -0.0019309806 0.0188174747 -0.0657884032 -0.0126924402 0.0565187567 0.0548147468 0.0114685360 -0.0043732046 -0.0242697949 0.0070092191 -0.0306502292 -0.0233771680 0.0501256241 -0.0358360299 0.0065829787 0.0315817205 -0.0238830208 -0.0012843584 0.1052004389 -0.1061117375 0.0211816848 0.0385251181 0.0494224663 -0.0540971262 0.0104480038 0.0095413565 0.0088442893 0.0399922564 0.0843158692 -0.1327367142 0.0173940095 0.1043902990 0.1227874644 0.0106133814 0.0158201170 0.0353195427 0.0239198755 0.0534494376 0.0642299839 0.0031972365 -0.0240051169 -0.0159708654 0.0106761904 -0.0360922895 -0.0162206438 0.0124066104 -0.0371211374 -0.0280157734 0.0002159490 0.0019706015 0.0041773882 -0.0046184248 0.0226159212 -0.0046092447 -0.0186015401 -0.0083134796 0.0013380344 0.0003955183 0.0057768160 -0.0096275110 0.0064073343 -0.0180801134 -0.0003243306 0.0180752096 0.0087991654 -0.0016891510 -0.0088210938 0.0092371224 0.0085372248 -0.0243437354 -0.0403572176 0.0228180986 0.0009874534 0.0036961425 -0.0027095233 -0.0073424135 -0.0426001688 0.0188947756 0.0095525383 -0.0001237678 0.0104129518 -0.0080914078 0.0029891800 -0.0054133075 -0.0041280983 -0.0104052203 0.0034615604 -0.0031637929 0.0054929497 -0.0007127104 0.0058237433 -0.0009192172 0.0070507985 0.0020215206 0.0085641284 -0.0011777606 -0.0051962271 -0.0023793197 -0.0036691958 0.0024060297 -0.0250436927 0.0073345229 -0.0006972821 0.0036480728 -0.0015353957 0.0154096127 -0.0180680044 0.0120881143 0.0048568510 0.0020754552 0.0001497909 0.0004715759 -0.0019973152 -0.0007464253 -0.0007003877 -0.0012809847 -0.0009738460 0.0004599153 -0.0009936065 0.0013149357 0.0003062602 -0.0009879959 0.0011985739 0.0080073076 0.0126354553 -0.0068426520 0.0134708537 0.0059361535 -0.0052695982 0.0110845039 0.0257867211 -0.0057538118 -0.0058415294 -0.0044271389 -0.0033653088 0.0276489888 0.0268105389 -0.0026723269 0.0040052513 -0.0260042507 -0.0027792942 -0.0002339243 -0.0134905768 0.0004530917 -0.0044819556 -0.0044453404 0.0079865225 -0.0106351120 -0.0134399949 -0.0005905074 0.0027464953 0.0066256958 0.0109232298 -0.0053933812 -0.0025506742 -0.0141221995 0.0077841296 0.0041806453 -0.0122831536 -0.0020739148 -0.0195153874 -0.0014396218 -0.0052322677 -0.0049313005 0.0052213522 -0.0159227343 -0.0090944216 0.0149775692 -0.0336018852 0.0204493676 0.0041093912 0.0002452353 0.0180211475 -0.0042826298 0.0147553302 -0.0034680428 0.0088314617 -0.0277627175 0.0254555437 -0.0008646512 0.0007184221 -0.0069272194 0.0153600184 0.0440324852 0.0366957424 -0.0033170389 0.1210219115 0.0796861210 -0.0406942235 0.0166184524 -0.0100473742 -0.0350094987 0.0328993563 -0.0107942963 -0.0358554438 -0.0630063817 0.0206345616 0.0209925379 -0.0205086410 0.0052007497 -0.0144567736 -0.0647486461 -0.0038066983 -0.0140568426 -0.1294325036 0.0186320425 0.0389098942 -0.0114094786 -0.0547492958 -0.0869265771 0.0497345607 0.0141241598 0.2018238073 0.0031172458 -0.0460307328 0.0361157767 -0.0184574789 0.0717378657 0.1961817802 0.0130175874 -0.0110745774 0.0213508903 0.0009616249 -0.0157931238 0.0090608676 0.0736517585 -0.0542741061 -0.1411817823 0.0506477287 0.0094509047 0.0281816910 -0.0360265203 0.0216554750 0.0787670283 0.2169446599 -0.0273322230 0.0304453570 0.0032454409 0.0813399186 0.0840872110 0.0657565755 -0.0768909253 -0.0948857260 0.0221248454 0.0197184766 0.0194210640 0.0111294589 -0.0019595131 -0.0201777872 0.0027406555 -0.0044843255 0.0242502909 -0.0105770099 0.0066476749 -0.0104006221 -0.0022392605 -0.0042174038 -0.0052779330 0.0006063965 -0.0038777594 -0.0031429363 0.0016640373 0.0019781332 0.0020554315 -0.0002707657 -0.0030593251 0.0000244974 0.0018745912 0.0006636649 0.0015218447 0.0020955758 0.0033368461 -0.0018563935 -0.0015743329 -0.0002601711 -0.0013660352 0.0012883331 -0.0010082536 0.0039907273 -0.0035414164 0.0029650519 0.0033992719 -0.0003675857 0.0039616164 -0.0059052085 0.0004418664 0.0005544651 0.0031039175 -0.0015849787 -0.0011546367 -0.0007646782 0.0004577057 -0.0031023479 0.0021147518 0.0005483522 -0.0009277239 -0.0003052689 -0.0002095203 0.0008680088 0.0011498781 0.0016014234 0.0000129182 0.0002030275 -0.0001617591 -0.0003152209 0.0006372741 -0.0009573409 -0.0000438133 -0.0004674217 0.0009939395 0.0001840325 -0.0013123291 0.0012019709 0.0003772329 0.0010276692 0.0002510356 0.0005810228 0.0015819012 -0.0008203769 -0.0002201346 -0.0012379042 0.0005719735 -0.0013166697 -0.0024477687 -0.0003723330 0.0003863091 0.0022575591 -0.0061733549 0.0018347015 -0.0002299922 -0.0022489024 -0.0054669905 0.0335697117 0.0027292935 0.0079764803 0.0009970944 -0.0003635036 -0.0004913705 -0.0013729808 -0.0022930593 0.0012015073 -0.0031024465 0.0000792720 0.0005538946 0.0011067284 0.0021912753 0.0013458595 0.0023831612 -0.0015916942 0.0044471921 0.0001128348 -0.0000260721 -0.0005836818 0.0015597787 0.0009228400 -0.0043443878 -0.0051672922 -0.0016814518 -0.0007187913 0.0014661892 -0.0000804924 0.0006853067 0.0004994998 -0.0100366841 0.0032699430 -0.0013091841 0.0015292339 -0.0039709101 0.0014644889 -0.0065067168 0.0071329435 -0.0003127827 -0.0015440836 -0.0007671460 0.0096761536 -0.0026488995 0.0064643748 -0.0073039976 -0.0094210195 0.0009708034 0.0027336834 -0.0017824771 -0.0074767934 -0.0063882076 -0.0005225312 -0.0023577302 -0.0012565272 -0.0014169804 -0.0088113637 -0.0078508318 0.0007275389 -0.0004183345 -0.0006984436 0.0002796806 0.0029482507 0.0012029429 0.0004318235 0.0007107428 0.0000359817 0.0083340311 -0.0012222199 -0.0039973937 0.0281499882 -0.0153167574 0.0042583994 0.0382831297 0.0033720338 0.0138688241 -0.0075433104 0.0039864182 0.0025410791 -0.0376716879 0.0239692912 0.0103574300 -0.0394766168 0.0110311138 -0.0082686011 0.0181752247 -0.0233720271 0.0094908318 0.0473267729 -0.0035926862 0.0078793037 -0.0003153663 0.0004894224 0.0062236762 -0.0393365720 0.0243949879 0.0091637039 -0.0472951161 0.0296710712 -0.0077126354 0.0228015140 0.0152169973 0.0043055976 0.0318831351 0.0138862946 -0.0093054052 -0.0078014450 0.0008261762 -0.0054236507 -0.0291635792 -0.0178641061 -0.0224027392 -0.0297943494 -0.0201916987 -0.0029890422 0.0272174214 0.0058602676 0.0070591130 0.0449016976 0.0065147780 0.0039669866 0.0026572552 -0.0061691588 -0.0019216348 -0.0272320592 -0.0279175958 -0.0190440455 -0.0291761130 -0.0450477360 -0.0109043943 0.0028244254 0.0052131182 0.0069192981 0.0103489355 -0.0007506745 0.0001411418 0.0035386683 -0.0001998164 -0.0075070297 0.0077652041 0.0054934528 0.0004205244 -0.0360923663 -0.0958712954 -0.0299226121 -0.0977202018 -0.0006347560 0.0085632335 0.0085118250 -0.1135909127 0.0837445659 0.0947142760 -0.0072732377 -0.0839449925 -0.0583342985 -0.0343050675 0.2765501762 0.0756445618 0.0844579297 -0.0192571871 -0.0740858233 0.1111329706 -0.0945920110 -0.0047080074 0.0624460425 0.0181425355 -0.0087973353 0.1523054749 0.0162038302 -0.0626854681 0.0035749112 0.2900054046 -0.0982212458 -0.0096921861 -0.1239682354 -0.0436646301 0.1266096157 -0.0635568896 -0.1281916837 -0.1766592585 0.0369127090 -0.0061878498 -0.0902356814 0.0085007933 0.0131662477 -0.2017951772 0.0412222785 0.0908795431 -0.0047942205 -0.2722111047 0.0540208351 0.1816738681 -0.1171121400 0.0430498387 0.0170131862 0.1534359964 0.0751006234 0.0742538177 -0.3172395771 0.0488932964 -0.1259450075 0.1157847241 -0.0014482920 -0.0010770350 0.0000783905 -0.0032398548 -0.0022957032 0.0010722451 -0.0009770567 -0.0004159208 0.0012481015 -0.0003675641 0.0003722365 0.0008957673 0.0017425273 -0.0003690638 -0.0009665741 -0.0007272741 -0.0002039698 0.0008738300 0.0034326416 -0.0015726870 -0.0010842167 0.0030190399 -0.0014802301 0.0001889299 0.0174814346 -0.1078712628 -0.1941596690 -0.0864375093 0.2096965178 0.3108399158 -0.0260447580 0.0886980573 0.0124404466 0.0886059773 0.0238326460 0.1329687518 0.0407954151 -0.0316521994 0.0676539371 -0.0921138556 -0.1043577257 0.0099796564 -0.0407890672 -0.0866975971 -0.0182034268 0.0609423179 -0.0482205080 0.1045457510 -0.0900967096 -0.0722609178 0.1446421214 0.3025538264 -0.0879834715 0.1371000451 0.0835765187 -0.0026481540 -0.1372867483 -0.0745449291 0.1075370988 0.0695524151 -0.0443013091 -0.0203198697 -0.0146766239 -0.0361263573 0.0001542850 0.0327454099 0.0117944948 0.0081294298 -0.0237083406 0.0029030395 -0.0012318943 0.0034860506 0.0027008117 0.0060584786 0.0034830892 -0.0009067798 0.0039433522 0.0029868554 -0.0026935225 -0.0014174291 -0.0026467305 -0.0005139932 0.0032952729 0.0008648242 -0.0011903037 -0.0020729097 -0.0009254200 -0.0020040264 -0.0037240587 0.0011084657 0.0009943482 0.0002075684 0.0018990664 -0.0019282609 0.0010543791 -0.0029561054 0.0038636142 -0.0041999720 -0.0031979619 0.0005341928 -0.0046919626 0.0051378080 0.0014155862 -0.0005164938 -0.0012847865 0.0006690783 0.0009075059 -0.0009923074 -0.0004809268 0.0021304522 -0.0041563683 -0.0001936305 0.0002203699 0.0001372467 0.0001496421 -0.0002942016 0.0001365290 -0.0006877921 -0.0000931918 0.0005200766 0.0001746093 -0.0000008484 0.0000932396 0.0000020058 -0.0000148390 -0.0004195425 -0.0009057671 0.0000800100 0.0001385645 -0.0006985523 -0.0001524935 0.0002141216 0.0004524615 0.0002810830 0.0006118423 0.0008769502 -0.0004454280 -0.0001546091 -0.0010079920 0.0008423764 -0.0000414970 0.0007262879 -0.0001382489 0.0005543204 0.0054452405 -0.0018221891 0.0014928617 -0.0016645255 0.0125645296 -0.0612930883 -0.0301499171 -0.0354936826 -0.0135059337 0.0004224693 0.0007125957 0.0009106588 0.0019256253 -0.0009077928 0.0027942514 -0.0003584973 -0.0004699937 -0.0009696419 -0.0024475227 0.0006517095 -0.0014574131 0.0030029086 -0.0053174116 0.0004613071 0.0012178628 -0.0009761737 -0.0013405943 -0.0018253486 0.0017721992 0.0022834670 0.0013935054 0.0005034955 -0.0012214939 0.0000650304 -0.0004765228 -0.0003796309 0.0042048895 0.0017383255 -0.0027748716 0.0025473899 -0.0017080787 -0.0028839940 0.0094249197 -0.0141644261 -0.0030383600 -0.0002589059 -0.0023311528 -0.0062673133 0.0020824897 -0.0014881214 0.0064139015 0.0064371424 0.0013452410 -0.0044001912 0.0025239849 0.0068380316 0.0058334212 0.0015757257 -0.0039071617 -0.0045670631 0.0025895190 0.0042118586 0.0043822544 -0.0005401203 0.0003342087 0.0005090711 -0.0002083100 -0.0023520880 -0.0009403871 -0.0002934983 -0.0005349074 -0.0000751896 0.0312013601 -0.0221113225 0.0048228901 0.0528699426 -0.0027201015 0.0225428787 0.0628434822 0.0053024887 0.0479132938 -0.0344132178 0.0265232356 -0.0041751829 -0.0867718716 0.0245371116 0.0135068850 -0.0786188367 0.0219639869 -0.0393302516 0.0321868057 0.0124929933 -0.0001725187 0.0950583264 -0.0262598482 0.0300379891 0.0022868794 0.0134735392 0.0039461037 -0.0748650606 0.0168219354 0.0246984839 -0.1037241461 0.0958282071 -0.0437627090 0.0272276046 0.0940133819 0.0500324931 0.0923541448 -0.0001900855 0.0523200656 0.0191877492 0.0826395154 0.0019657853 0.0047306878 -0.0587393148 -0.0544384182 -0.0374090694 0.0217302958 -0.0664345288 0.1087314320 0.1140140841 0.0363839853 0.1341412840 -0.1185337365 0.0715572050 0.0045188068 0.0183458398 -0.0213280371 0.0061557101 -0.2141348914 -0.0033332740 0.0050863178 -0.0050425518 -0.0277211257 0.0176316077 0.0062097350 0.0206317170 0.0284719211 -0.0123797938 -0.0049363161 -0.0402567454 -0.0217282985 -0.0041968506 0.0026578846 -0.0215170444 -0.0298684539 0.0045280430 0.0908824562 -0.0822821465 0.1143502558 0.0152552241 -0.0305049923 -0.0202455087 0.1358862880 -0.0486096464 -0.1366662278 -0.0434320134 0.0241665479 0.1314114984 0.1535624092 0.0064024560 -0.1017773205 -0.0632309172 0.0992332673 0.0747427172 -0.1292915751 0.0292530030 0.0380734846 -0.0699404758 0.0216271956 0.0185876888 -0.1002867845 0.1049673860 0.1574222074 0.1086758807 0.0251500920 -0.0052616842 0.0325647031 -0.0421497100 0.0194976974 0.0643794280 -0.0259730209 0.0175064346 0.0198277533 -0.0054599627 -0.0136530318 -0.0261694048 0.0093095692 0.0409069999 0.0461636626 0.0550919024 -0.0427031653 -0.0198495956 0.0411787701 -0.0125991232 0.0447024010 -0.0380272941 0.0055604822 -0.0300174313 0.0098435241 -0.0941651961 0.0422092791 -0.0765681195 -0.0301202007 -0.0567307906 0.0215261972 0.0023887331 0.0019612903 -0.0002833154 0.0041677984 0.0027817132 -0.0009420198 0.0018112015 0.0009572843 -0.0011448584 0.0021571526 0.0008394314 -0.0010499585 -0.0019385999 0.0005246925 0.0006642134 0.0000531227 -0.0035952026 -0.0022504938 -0.0074518602 0.0072626155 0.0045999874 0.0009987939 0.0021637374 -0.0024125364 0.0062131403 -0.0059385652 -0.0030824967 -0.0024026262 0.0066358546 0.0040198565 0.0007201188 0.0044806320 -0.0012759537 0.0026331383 -0.0056700210 0.0003032977 0.0041381701 -0.0045513163 0.0029199614 -0.0048210597 0.0041368312 0.0027503695 -0.0015373280 -0.0010200656 0.0012556730 -0.0026613461 0.0117514602 -0.0088841857 0.0057320699 -0.0031977832 -0.0146144895 -0.0161917728 0.0179797886 -0.0043824458 -0.0069120597 0.0030358074 0.0088611706 -0.0008208022 0.0069628819 0.0036114135 0.0053467729 -0.0067119326 -0.0033706616 0.0015657446 0.0002621828 -0.0026562825 -0.0039156043 -0.0008672191 0.0037058581 0.3836064162 -0.2112380753 0.4260867608 -0.0206298299 0.0035914506 -0.0074681192 0.0113268869 -0.0034528002 0.0299695160 -0.0022820059 -0.0066698703 -0.0069919468 0.0066087351 0.0054778435 -0.0198130966 -0.0152550166 0.0054598068 -0.0154266910 0.0043929370 -0.0137482482 0.0259270993 0.0268458323 -0.0102658154 0.0203416074 -0.0491856758 0.0218754809 -0.1196284927 -0.0400643461 0.0201472125 -0.0805719092 -0.0138156402 0.0028283783 0.0012661488 -0.0504244661 0.0264688902 -0.0780826195 0.0228595279 -0.0032693237 0.0399457873 -0.0639624230 0.0796476144 -0.1092539964 0.0185892620 -0.0021204051 0.0645576618 -0.0236936067 0.0010700386 -0.0787470648 -0.0462441426 0.0044730294 -0.0753819971 -0.0229054152 0.0118710561 -0.0511430557 0.0525928074 -0.0059444901 0.0975656466 0.0379665613 -0.0180192178 0.1104176827 -0.1465002338 0.0374894240 -0.3239312687 -0.1712311198 0.0509116099 -0.3737850991 -0.0037197432 0.0120914537 -0.0140260221 0.0029706116 0.0163677196 0.0278557187 -0.1510753458 0.0406980555 -0.3752477426 -0.0004343585 0.0110066760 -0.0068888670 -0.0038255720 0.0152558082 -0.0009052499 0.0005171238 -0.0034014975 0.0005685748 -0.0063958589 0.0149118255 -0.0017103993 0.0514041896 -0.0648009155 0.1322842974 -0.0043319259 0.0115890898 -0.0327500476 -0.0036193770 -0.0053680418 -0.0014035768 -0.0047756136 -0.0073164626 0.0006330464 -0.0068623302 0.0055163092 -0.0085112373 0.0010159822 0.0047972362 0.0105869795 -0.0079790151 0.0135837043 -0.0342922059 0.0007734396 -0.0079615263 -0.0090399232 0.0290452688 -0.0054725964 0.0058581701 -0.0252174922 0.0461012112 -0.0034408915 0.0311166888 -0.0128072302 0.0131772636 0.0301826321 0.0287581320 -0.0237793096 0.0087640064 -0.0404386172 0.0069293250 0.0068415271 0.0160171671 -0.0200800115 0.0006074967 0.0004204583 -0.0074732834 -0.0030855333 0.0139992507 0.0067471025 -0.0027394117 0.0262092779 0.0195646662 -0.0009227057 0.0039037639 0.0059820621 0.0074039399 -0.0173742690 0.0053734724 0.0126233242 -0.0350509210 -0.0200462137 0.0049880676 -0.0053470711 0.0020309249 0.0020528843 0.0054331288 0.0029244945 0.0002000472 0.0018199817 0.0060697888 -0.0058710562 0.0050800632 -0.0013366853 -0.0059471547 -0.0031268338 -0.0008706228 -0.0043079671 -0.0001111850 -0.0068795553 -0.0030969318 0.0099818286 -0.0037275374 0.0040270535 -0.0063574584 0.0057885893 -0.0005809250 0.0017007656 -0.0001516750 -0.0000812133 -0.0044530871 0.0024634638 -0.0072531911 0.0105584924 -0.0082954727 -0.0035901703 0.0007730149 0.0003398422 -0.0023943827 -0.0038113237 0.0020248919 0.0010788449 0.0005225002 0.0002623276 0.0044884263 -0.0007568486 0.0033553767 0.0020708610 0.0036349062 0.0006397230 -0.0056743696 0.0063060154 -0.0013855743 -0.0054405012 -0.0022437286 -0.0010956310 -0.0023654586 0.0047523602 -0.0028436185 0.0019363165 0.0050730652 0.0016722756 -0.0015261486 0.0135288289 -0.0003936134 0.0037879241 -0.0001041141 0.0023829246 0.0031026209 -0.0030414459 -0.0020176906 0.0003918381 -0.0013327264 0.0013211844 -0.0003218622 -0.0017754366 0.0009200098 -0.0025077046 0.0017999863 0.0003851656 -0.0007152722 0.0012677027 -0.0010301175 -0.0030069485 -0.0032380336 0.0009203562 -0.0017494593 -0.0012226518 0.0019534697 -0.0019522707 -0.0045273190 -0.0019505563 -0.0040570426 0.0024439195 0.0000113664 -0.0004037322 0.0041964562 -0.0005148405 0.0015681990 -0.0009624640 -0.0007739135 -0.0032068250 0.0043307770 -0.0005335504 0.0002023642 -0.0030530240 -0.0024133704 -0.0012894266 -0.0025694047 -0.0020320778 0.0002510424 0.0029492541 -0.0009286766 -0.0050458904 -0.0053643000 0.0004895487 -0.0000379135 -0.0027687626 -0.0017525548 -0.0063898434 -0.0048656019 0.0013423313 0.0008613668 0.0018685478 -0.0107082207 0.0038016215 0.0025456070 -0.0000469654 0.0018990464 0.0013516612 0.0065596861 0.0053473839 -0.0004105019 -0.0050185803 0.0023852216 0.0022690399 0.0065323224 0.0047852347 0.0050513257 0.0040825866 0.0181912584 0.0189328317 -0.0055266745 0.0014717195 0.0025031588 -0.0074422745 0.0030434041 -0.0062903550 -0.0040426111 -0.0097682312 0.0088245135 0.0055172435 0.0003971045 0.0131254132 -0.0009943460 -0.0083221260 -0.0048292812 -0.0097917499 -0.0201870168 0.0033565562 0.0164449282 0.0378620762 -0.0227987376 -0.0137800858 -0.0007503342 0.0354486978 0.0041228379 0.0103048973 0.0296835591 -0.0101728747 0.0092342856 -0.0232295879 -0.0100402072 0.0113669392 -0.0170528916 0.0176951983 -0.0128749354 0.0216346595 0.0143857727 -0.0047775381 0.0046664793 0.0073966393 -0.0097701391 0.0364363710 -0.0276926288 0.0287139310 -0.0084354260 -0.0500107796 -0.0643435889 0.0613843824 -0.0098476867 -0.0198791905 0.0046945701 0.0284155599 -0.0113190751 0.0281448561 0.0250668169 0.0135098036 -0.0323548309 -0.0148183347 0.0037415896 0.0098080723 -0.0027802710 -0.0079561353 0.0063417525 0.0031858271 -0.0236892978 0.0133658206 -0.0286889381 0.0000365155 0.0016783626 -0.0019699768 -0.0003226255 0.0006702942 -0.0008671691 -0.0016479697 0.0005309700 -0.0011215068 -0.0002759691 0.0002407540 0.0022095355 0.0009383757 -0.0003712389 0.0006805360 -0.0012679675 -0.0000157615 -0.0009062341 -0.0015794088 0.0005426117 -0.0008326223 -0.0005224864 0.0015692919 0.0023165734 0.0021270735 -0.0009840560 0.0015047046 0.0013277735 -0.0023211815 0.0026587423 0.0052767064 -0.0020284219 0.0049455025 -0.0019696433 0.0006297809 -0.0042373692 0.0003267680 -0.0014252528 -0.0035513661 -0.0049038708 0.0018191780 -0.0104580905 0.0039128232 -0.0016287566 0.0087789991 0.0035661390 -0.0018083613 0.0103730108 0.0029229121 -0.0001932330 0.0060014665 -0.0059499703 0.0027928355 -0.0143167932 -0.0069044118 0.0020484191 -0.0153356738 0.0220592061 -0.0083272856 0.0531524317 0.0271808881 -0.0079548226 0.0583525030 0.0051073961 -0.0001925389 0.0113662735 0.0024416010 -0.0005013941 0.0071581838 0.0249403810 -0.0087811473 0.0596102560 0.0017193960 -0.0015266060 -0.0007522520 0.0027474590 -0.0000047346 0.0106716341 0.0038639304 -0.0030742142 0.0028725855 -0.0011613812 0.0024461584 -0.0060288253 -0.0014305566 -0.0084616267 0.0119574539 0.0105699767 -0.0128386181 -0.0159052857 0.0311571936 -0.0685428812 -0.0473234608 -0.1066416869 0.0515993440 -0.0495591669 -0.0100790935 -0.0672828121 0.0250268797 0.0862858316 0.1109455466 0.0933550174 -0.0133939134 -0.0018078437 0.0005039121 -0.0015633550 0.0006952645 0.0009692937 0.1284089221 0.0273729353 0.0180789601 -0.2631400296 0.4140367498 -0.0309054940 0.0270432477 0.0942999575 0.0378019745 -0.0154899969 -0.0469549552 0.2615110147 -0.0199378352 0.0244397517 0.1544492990 0.0218169221 0.1401349468 -0.1517641260 -0.1175249240 -0.0996958479 -0.0146412711 -0.0984882903 0.4271236177 0.4632480046 -0.1446816493 0.0073618481 0.0038364183 0.0045615407 -0.0033950717 -0.0028809325 0.0019548988 0.0141863976 0.0082292671 0.0044880357 -0.0054249932 -0.0045485360 0.0336096699 -0.0275901491 0.0096103660 0.0070732039 0.0317997869 0.0256504213 -0.0009559170 0.0139931272 0.0348032261 -0.0396200929 0.0238854167 -0.0048535731 -0.0270851730 -0.0227110581 -0.0176145761 -0.0201526860 -0.0094302052 -0.0372077517 -0.0209965379 0.0647233591 -0.0189155217 0.0313084121 -0.0109450631 0.0136931177 -0.0038639029 0.0159760576 -0.0069616116 0.0137400660 -0.0233140189 -0.0031905551 -0.0440538157 0.0485287294 -0.0375460682 -0.0111537457 -0.0047935186 -0.0041296778 -0.0128892178 -0.0091872917 -0.0009309239 -0.0016360365 -0.0023030344 -0.0011891892 0.0093701970 0.0043016498 0.0121208262 0.0053117320 0.0096052501 0.0076719648 -0.0199086313 -0.0057579589 -0.0029984251 -0.0171171466 -0.0065839843 -0.0053001674 -0.0034734553 0.0043012140 -0.0012559091 0.0167837802 0.0099618447 0.0096204333 0.0034397153 0.0158212922 0.0074353745 0.0235750702 -0.0011483306 0.0154558578 0.0174742393 -0.0183737706 -0.0133997432 0.0031148651 0.0001940452 0.0022515757 -0.0012828243 -0.0004597958 0.0036065087 -0.0131392317 0.0103732848 0.0058841325 -0.0015915086 0.0059491603 -0.0071270402 -0.0209741298 -0.0182171045 0.0041140166 -0.0154875305 -0.0058838968 0.0141626945 -0.0159618864 -0.0280071014 -0.0181231562 -0.0310385582 0.0180069232 -0.0001898344 0.0037751558 0.0185846664 0.0006863803 0.0126989991 -0.0079439809 -0.0059616365 -0.0121414970 0.0184860348 -0.0014589541 0.0093931874 -0.0142257648 -0.0247647864 -0.0055863199 -0.0098178867 -0.0053279255 -0.0008684146 0.0077582704 -0.0046993810 -0.0167622964 -0.0229336568 0.0019526495 0.0004616742 -0.0082794635 -0.0050233509 -0.0283622127 -0.0203390419 0.0044452693 -0.0040631441 0.0121146865 -0.0324635326 0.0116852223 0.0107639604 -0.0038016665 0.0067579360 0.0050469339 0.0189332158 0.0128302634 0.0041562084 -0.0159683615 0.0014561814 0.0066963983 0.0221007233 0.0011247943 0.0024693391 -0.0001805527 -0.0051970072 -0.0041673879 0.0053649469 0.0016877946 0.0025131302 0.0035832310 0.0064615418 0.0090953152 0.0036859989 0.0039324491 -0.0015589654 -0.0013774987 -0.0033703955 -0.0032114335 0.0031524908 0.0105909159 -0.0044642471 0.0018713800 0.0028571206 -0.0017138984 -0.0012085122 -0.0965526324 0.0585911462 0.0407176422 -0.0041657951 -0.0933992544 -0.0172254234 -0.0281561535 -0.0763713943 0.0256494582 -0.0221487372 0.0586550447 0.0277149725 -0.0272774360 0.0413650348 -0.0462442379 0.0329320121 -0.0577414362 -0.0388131960 0.0091520630 -0.0124117713 -0.0173239294 0.0270032119 -0.0984591915 0.0772537918 -0.0748318658 0.0230387096 0.1364485129 0.1751673997 -0.1647973695 0.0309775090 0.0552470078 -0.0121068616 -0.0796927425 0.0287097445 -0.0765477318 -0.0701889505 -0.0373320403 0.0877266915 0.0415742598 -0.0172479646 -0.0260085922 0.0040237094 0.0240589883 -0.0174985784 -0.0068669839 0.0214058460 -0.0103090597 0.0259335044 0.0023921361 -0.0053018602 0.0075590873 -0.0009347655 -0.0009892657 -0.0013494946 0.0040016986 -0.0022481516 0.0037372523 0.0013273545 -0.0007803076 -0.0040326075 -0.0007150967 -0.0003095525 0.0000661056 -0.0009546286 0.0002165014 -0.0011111580 0.0005819942 -0.0027256562 -0.0000376118 0.0094049154 -0.0076521420 0.0083626850 0.0033305738 -0.0025266403 0.0072589340 -0.0028258484 0.0022538082 -0.0036041362 -0.0020367464 0.0032099542 -0.0058367967 0.0018904382 0.0005239209 0.0014737716 -0.0046899006 0.0069777264 -0.0126655561 0.0025664219 -0.0007746784 0.0090688431 -0.0020333923 -0.0003438975 -0.0087374692 -0.0060095219 0.0005135008 -0.0080489189 -0.0024499731 0.0013997235 -0.0062484954 0.0073979611 -0.0010500566 0.0132709899 0.0045653053 -0.0019673842 0.0149576433 -0.0228651145 0.0062114803 -0.0490248871 -0.0255017857 0.0104462078 -0.0566056082 -0.0066851107 0.0037419809 -0.0123402451 -0.0049799657 0.0050153210 -0.0077748721 -0.0223276960 0.0068701684 -0.0586513474 -0.0058061545 0.0054003829 0.0033664615 -0.0088459194 -0.0003633194 -0.0411014501 -0.0093481139 0.0129476750 -0.0068916877 -0.0016125234 0.0025520807 -0.0069310732 0.0014521564 -0.0135762309 0.0214450723 0.0080528567 -0.0073879681 -0.0142794253 0.0244694460 -0.0520002627 -0.0301048151 -0.0824788149 0.0451952683 -0.0372230954 -0.0011544187 -0.0532076152 0.0135374001 0.0657095574 0.0830457817 0.0617151820 -0.0138385046 -0.0007836931 -0.0018992193 -0.0012751357 0.0007989155 0.0003711587 0.0787789917 0.0352288983 0.0044695683 -0.1919062618 0.3004359507 -0.0264365887 0.0202874703 0.0653883944 0.0202837868 -0.0137953066 -0.0409436787 0.2183206623 -0.0159976430 0.0372257983 0.0993303102 -0.0012659062 0.1209442116 -0.1277779279 -0.0924861159 -0.0744879029 0.0048712273 -0.0728712895 0.3166366555 0.3596076191 -0.1074654683 -0.0282021743 -0.0200887220 0.0040978237 -0.0024549017 -0.0024188431 0.0029939401 0.0131664409 0.0091469796 0.0059588075 -0.0076322759 -0.0062518169 -0.0797780295 0.0775357793 -0.0315243121 -0.0184482603 -0.0804290272 -0.0630773504 0.0034233455 -0.0311678577 -0.0902402939 0.1008984827 -0.0534261502 0.0067216574 0.0708200298 0.0601053911 0.0384422594 0.0515209089 0.0219112047 0.0936083908 0.0456462635 -0.1757858650 0.0607008095 -0.0793890727 0.0278583567 -0.0338248481 0.0081079780 -0.0438310974 0.0199391732 -0.0386836652 0.0430851919 0.0179523050 0.0985434307 -0.1482746718 0.1173079017 0.0312955353 0.0137066325 0.0086621983 0.0356467095 0.0277372433 -0.0017880440 0.0029222691 0.0028662849 0.0023259600 -0.0282130527 -0.0096810182 -0.0324774117 -0.0162820474 -0.0274898156 -0.0169857141 0.0602260697 -0.0029618297 0.0121962634 0.0511153437 0.0150940729 0.0130997659 0.0098257825 -0.0165435685 0.0059197205 -0.0425755324 -0.0264606245 -0.0257035331 -0.0071789515 -0.0555484114 -0.0151472693 -0.0586615704 0.0042797671 -0.0399482192 -0.0434769860 0.0479130449 0.0320872988 -0.0067629040 0.0013492772 -0.0073636675 0.0032887172 0.0037874923 -0.0089887040 0.0322326529 -0.0254135310 -0.0168106213 0.0047314206 -0.0134428864 0.0183942789 0.0531292604 0.0469192116 -0.0095148259 0.0383340674 0.0133706366 -0.0373530342 0.0432857725 0.0739567431 0.0526326958 0.0779962206 -0.0454352489 0.0019738277 -0.0096545830 -0.0467436809 -0.0038974040 -0.0308585344 0.0196124858 0.0163320450 0.0291269192 -0.0455961726 0.0037355467 -0.0216029702 0.0374373215 0.0696403479 0.0131271522 0.0257162701 0.0139633253 0.0025710185 -0.0200466663 0.0098747211 0.0450674238 0.0577062114 -0.0046005919 -0.0009835866 0.0222830227 0.0150163774 0.0734019633 0.0517260827 -0.0101414469 0.0061432276 -0.0287034643 0.0895704167 -0.0322893198 -0.0247088051 0.0063679773 -0.0169965487 -0.0139076467 -0.0516816169 -0.0410069782 -0.0049129653 0.0405639837 -0.0083828211 -0.0214322863 -0.0579976986 0.0001669646 0.0014105833 0.0003476376 -0.0059077499 -0.0043279802 0.0054340288 0.0013526838 0.0027331498 0.0048716280 0.0077961661 0.0076466890 0.0033355230 0.0039920973 -0.0009110559 -0.0015360536 -0.0026606047 -0.0014908130 0.0026231670 0.0088002493 -0.0035981188 0.0008107122 0.0066192037 -0.0023999326 -0.0001779593 -0.0239291617 0.0075831183 -0.0232450135 -0.0015469104 0.0039718044 0.0289570829 -0.0072380431 -0.0043927176 0.0084004729 -0.0020962055 0.0099619206 0.0096447120 -0.0123522288 0.0130011653 0.0102798994 -0.0306805324 -0.0049667820 0.0157522527 0.0177139470 -0.0281471543 -0.0167537957 -0.0129278642 0.0524321519 -0.0503291854 -0.0181447546 -0.0373844581 -0.0666440276 -0.0341136214 0.0622709547 -0.0418475522 -0.0332979089 0.0316907186 0.0495049699 0.0007786612 -0.0169322002 -0.0095440366 0.0256367728 -0.0220787736 -0.0055647263 0.0130404379 0.0102857658 -0.0080882691 -0.0047357796 0.0043308614 0.0105510517 0.0113497032 -0.0062413095 0.0117410477 -0.0039362508 -0.0013642373 -0.0047208407 0.0011692814 -0.0017543519 0.0003599058 -0.0009339201 0.0004993548 -0.0008448925 0.0006365086 -0.0009294172 0.0000999682 0.0004308035 0.0010719791 0.0000842942 0.0002031980 0.0002107755 0.0010084640 0.0001621106 -0.0008815999 0.0006606240 -0.0044783203 0.0036643848 -0.0077210341 -0.0027494540 0.0026579755 -0.0025828042 -0.0001495383 -0.0005587412 0.0000187624 -0.0002047162 0.0005777811 -0.0018260347 0.0012565692 -0.0004852654 0.0005597576 -0.0008322351 0.0016898787 -0.0052418435 -0.0010934513 -0.0000541462 -0.0004456395 0.0006877239 -0.0002206931 -0.0002308233 -0.0012550176 -0.0010260473 0.0005602113 -0.0006254821 0.0004207705 -0.0005477142 0.0005399833 0.0009302260 -0.0000513445 -0.0001478142 0.0000028690 -0.0004153335 -0.0004769768 -0.0012218355 0.0037431704 0.0012273794 0.0013293162 0.0031451934 0.0006952107 0.0011345351 0.0017447559 0.0006145005 0.0015183008 0.0015436210 0.0009783909 -0.0007746748 0.0018563124 -0.0016705913 0.0011320910 -0.0015497921 0.0016362054 -0.0036150277 0.0301268162 -0.0345714103 -0.0513126400 -0.0107657641 0.0007875415 -0.0008573297 -0.0008155012 -0.0016126519 0.0018922173 -0.0008893125 -0.0007954414 0.0020786912 -0.0077011395 0.0013170030 0.0226219181 -0.0072617125 0.0167780668 -0.0005481800 0.0485832566 -0.0169271215 -0.0735759912 0.0352862596 -0.0097881284 0.0492478394 -0.0757342728 -0.0044248975 -0.0011622301 0.0016268147 -0.0001819854 0.0006910664 0.0006691731 -0.1826209789 0.1767470774 -0.1221153502 0.1355674546 -0.1844391114 -0.0834406518 0.1078086682 -0.1929576288 -0.0543679189 -0.0103578864 -0.0377793484 0.3275911542 -0.0252386138 0.0281421391 0.1940336268 0.0181136214 0.1924303699 -0.1887206670 -0.0228807773 0.1393354747 0.3533207194 0.0304788315 -0.0682850708 0.1550741960 0.0462440790 -0.4303767809 -0.2709470247 0.0017381527 -0.0013842221 -0.0015355141 0.0014345953 0.0058684677 0.0041327265 0.0019238384 -0.0004080729 -0.0011546039 -0.0123383749 0.0335270774 -0.0204558310 -0.0038988878 -0.0284554314 -0.0078527671 0.0107175319 0.0019330830 -0.0298701443 0.0238537172 -0.0190101525 0.0055880759 0.0153086574 0.0298272124 0.0037231027 0.0038679472 0.0012833695 0.0319287505 0.0004458707 -0.0781741691 0.0480730156 -0.0094127305 0.0143178119 -0.0151913590 -0.0000768371 -0.0247016487 0.0140434403 -0.0171979027 0.0256323244 -0.0033343985 0.0034776788 -0.0603098271 0.0578974382 -0.0223538369 0.0169212765 0.0505575224 -0.0089128711 -0.0132088405 0.0557855882 0.0437072901 0.0400433602 0.0155158262 0.0433702178 -0.0080694862 -0.0239194289 0.0288299880 0.0202488734 -0.0438297167 0.0104455025 0.0963707352 0.0203323969 -0.0498209740 -0.0254275160 0.0057285935 0.0020316296 0.0301212755 -0.0108754426 -0.0090162171 -0.0279449837 -0.0133636483 0.0389781134 0.1029472417 -0.0090029297 -0.0141195609 0.0057671717 -0.0122695645 -0.0090660446 0.0166615037 0.0060063357 -0.0344388747 -0.0136438908 0.0152902741 -0.0101326638 -0.0278546408 -0.0245675184 0.0096818792 0.0052063387 -0.0067971180 0.0102594417 -0.0044885156 -0.0007403947 0.0105681167 0.0236605528 -0.0126220188 -0.0029305308 0.0014321311 -0.0005509306 0.0219055506 0.0271161961 -0.0044669480 0.0105466557 -0.0155487340 0.0165768789 0.0069759584 -0.0232236642 0.0080422907 -0.0038787575 -0.0039186662 0.0006328470 0.0147273770 -0.0206996732 0.0165630127 0.0093218580 0.0154459890 0.0020494331 0.0127127484 0.0001537582 -0.0067985627 0.0000281839 0.0157536266 0.0209150152 -0.0159146375 0.0217819180 -0.0043390257 -0.0016710165 -0.0150091638 -0.0210114600 -0.0013692182 0.0231936495 0.0034116655 0.0340669344 -0.0272311919 -0.0510377814 0.0255427802 -0.0255218224 0.0323933800 -0.0010883598 0.0042564630 0.0366789519 0.0669142722 -0.0517992615 0.0004154778 0.0374066885 0.0424514723 0.0257311338 -0.0002269415 -0.0004161138 -0.0000548602 -0.0030380102 -0.0005603963 0.0002250647 0.0010613492 0.0019922466 0.0003512149 -0.0018328536 -0.0003380883 0.0003874825 0.0030535460 -0.0025305772 0.0003148310 0.0001792200 -0.0042437007 0.0017862935 -0.0010028396 0.0019356538 0.0005784394 0.0033756452 -0.0019891323 -0.0007180712 -0.0322048068 0.0092694710 -0.0304430911 -0.0005316464 0.0049203851 0.0411394846 -0.0094934043 -0.0072052744 0.0110160156 -0.0031818244 0.0118836655 0.0136005217 -0.0132935392 0.0172524905 0.0114683658 -0.0353891443 -0.0103740262 0.0175098858 0.0194647483 -0.0354966643 -0.0199295706 -0.0134373509 0.0606415856 -0.0583816584 -0.0247337377 -0.0453313312 -0.0761200524 -0.0341481673 0.0722315394 -0.0465568602 -0.0378306315 0.0373053079 0.0578885817 0.0030322746 -0.0173095827 -0.0108047432 0.0296184748 -0.0251068410 -0.0058119769 0.0148511580 0.0118465128 -0.0106974198 -0.0067658656 0.0043117285 0.0127063585 -0.0246578273 0.0125933952 -0.0303984890 -0.0033083745 -0.0005655824 -0.0056224928 0.0002426746 -0.0011471099 -0.0015626505 0.0003471533 0.0011475823 0.0004350305 0.0000203852 -0.0014087574 0.0020648520 0.0013827689 0.0004927986 0.0014907250 0.0011927102 0.0017675590 -0.0011433667 -0.0018303339 0.0018405397 -0.0021982746 -0.0011727208 0.0025184566 0.0014971861 -0.0015350354 0.0018095778 0.0024165973 0.0004246376 0.0013169195 -0.0026633140 0.0013753567 -0.0021266411 0.0053141389 -0.0017091506 -0.0002944914 -0.0009731576 0.0052006720 -0.0071645192 0.0138312095 0.0000762992 -0.0002104019 -0.0029894185 -0.0000003311 0.0006152949 0.0030948703 0.0031737936 0.0008710560 0.0019548072 0.0014995991 -0.0010588558 0.0029136738 -0.0025382609 -0.0006186122 -0.0031686428 -0.0008249689 0.0008337118 -0.0039367840 0.0066075395 -0.0002048248 0.0105483324 0.0050865577 -0.0034626236 0.0110174287 -0.0017241714 -0.0007410390 -0.0008477778 0.0004366930 -0.0026703776 -0.0010892362 0.0046004989 -0.0003841030 0.0124805034 -0.0007748842 -0.0012012739 -0.0014521730 0.0037631320 -0.0068055812 0.0447665890 -0.0479910083 -0.0531526715 -0.0159129496 -0.0009974855 0.0006535673 0.0021202870 -0.0006511897 0.0018575202 -0.0054057127 0.0018502677 -0.0031858400 0.0092606399 -0.0005064744 -0.0247457000 0.0056586230 -0.0221449260 0.0012047132 -0.0432666225 0.0183289923 0.0729153685 -0.0358328907 0.0104316594 -0.0458855038 0.0770160880 0.0048964324 0.0004233913 -0.0002530099 0.0002514917 -0.0009293415 -0.0005784939 0.1741585894 -0.1554546256 0.1111847027 -0.1406612020 0.1989801228 0.0702471003 -0.0893043513 0.1796009783 0.0598194787 0.0007750342 0.0321990205 -0.3021550708 0.0226850471 -0.0195608811 -0.2070055972 -0.0202394418 -0.1834530995 0.1809429775 0.0217483270 -0.1354040139 -0.3436534609 -0.0309213115 0.0729090978 -0.1460642367 -0.0461814023 0.4244769820 0.2682727952 -0.0015315060 0.0006554928 0.0010223636 -0.0016450647 -0.0054987272 -0.0046674029 -0.0022863357 0.0014083203 0.0016717852 -0.0234336362 0.0366407321 -0.0188804237 -0.0052001096 -0.0371152264 -0.0147117290 0.0111895142 -0.0036696070 -0.0379503036 0.0332178124 -0.0301489952 0.0108136776 0.0193361599 0.0370335791 0.0114111874 0.0071857483 0.0060262502 0.0423790027 0.0089567748 -0.0913670014 0.0492350852 -0.0169091818 0.0161390336 -0.0184696070 0.0016871682 -0.0287109787 0.0159950866 -0.0229980677 0.0400285202 -0.0060506933 0.0175089106 -0.0598689115 0.0596195964 -0.0249116975 0.0192278447 0.0628413609 -0.0116761831 -0.0084149468 0.0655855624 0.0566633084 0.0438635576 0.0203643508 0.0496073069 -0.0037973290 -0.0341651724 0.0376095908 0.0192422725 -0.0534206286 0.0276384337 0.0906596898 0.0343758429 -0.0583824006 -0.0310145846 0.0061825264 0.0056446482 0.0268497607 -0.0070558930 -0.0131178250 -0.0319196553 -0.0201675345 0.0623743132 0.0993302004 -0.0035180842 -0.0201842599 0.0058035967 -0.0159368534 -0.0133857310 0.0211887891 0.0100234141 -0.0431476652 -0.0133039884 0.0175243635 -0.0141948850 -0.0314377129 -0.0322013997 0.0135474327 0.0051861310 -0.0083137210 0.0119196175 -0.0070261294 0.0003524108 0.0157966244 0.0304613886 -0.0163357617 -0.0005527457 0.0030398317 -0.0019826219 0.0279021090 0.0350196632 -0.0059238199 0.0180157482 -0.0214957008 0.0202144425 0.0071392345 -0.0298995902 0.0100684037 -0.0074859675 -0.0031720994 0.0009111549 0.0193208960 -0.0267481703 0.0210007368 0.0080618518 0.0197236571 0.0041841176 0.0145426117 0.0016955412 -0.0087105260 0.0008234026 0.0200887976 0.0245681351 -0.0177229926 0.0268294216 -0.0060831447 -0.0033886827 -0.0183464472 -0.0247283934 0.0019460803 0.0287558711 0.0045128268 0.0385587498 -0.0328444159 -0.0596733993 0.0298711489 -0.0294627984 0.0390824444 -0.0003006391 0.0040439074 0.0441450337 0.0775922111 -0.0609549304 0.0000252023 0.0467547814 0.0492917767 0.0303961244 -0.0007238794 -0.0006081178 0.0000949363 0.0019741087 0.0000280347 -0.0006887507 -0.0020212711 -0.0030547558 -0.0003165264 -0.0006334159 -0.0012697820 -0.0004032684 -0.0028215284 0.0035736914 -0.0008812065 -0.0041525066 0.0029760837 0.0000702846 0.0068919046 -0.0034226961 0.0006515177 -0.0055161761 0.0035165030 -0.0004293938 -0.0056054465 0.0030793501 0.0022271538 0.0043758788 -0.0087663000 0.0004497333 -0.0005438023 -0.0075382478 0.0027147328 0.0004448162 0.0019668154 0.0004452210 0.0004002412 0.0018141757 -0.0037713295 -0.0069863731 0.0114576672 -0.0001051824 0.0103923959 -0.0015505109 -0.0046215778 -0.0038279523 -0.0045031044 0.0040067768 0.0019575625 0.0098898517 0.0070491465 0.0083271813 -0.0211508378 -0.0188217780 -0.0000899822 -0.0039650431 -0.0114540691 0.0022101257 -0.0002103103 -0.0039041834 0.0006459298 0.0044564940 0.0029368380 -0.0019330913 -0.0029748686 -0.0032062540 -0.0000870442 -0.0037480301 0.0041539894 0.1518275726 -0.0771751682 0.1611225756 -0.0134977848 0.0103645634 -0.0203254005 0.0047701552 -0.0021080108 0.0127248731 -0.0074395490 0.0013941767 -0.0090035517 -0.0006802024 0.0035757302 -0.0025679068 -0.0029812795 -0.0011385222 -0.0042392402 0.0003980679 -0.0058267969 0.0083309263 0.0106726940 -0.0052745376 0.0132992795 -0.0330038965 0.0170584350 -0.0583854508 -0.0187451168 0.0077689866 -0.0403147197 -0.0064206426 -0.0007534269 -0.0012799360 -0.0070078352 0.0099480472 -0.0294933789 -0.0034030191 -0.0064890640 0.0028812112 -0.0748837259 0.0631100995 -0.1521270436 -0.0383923872 0.0231547582 -0.0779663768 0.0180615185 -0.0178187490 0.0271306005 0.0089480878 -0.0050903068 0.0419953019 0.0237913664 0.0056735796 0.0354960347 -0.0269647162 0.0236140218 -0.0842905692 -0.0523039873 0.0101534127 -0.0877826319 0.1722443232 -0.0661236657 0.3902921607 0.1753832440 -0.0724086495 0.3641185584 0.0586361285 0.0067029514 0.1576358263 0.0606705272 -0.0146892568 0.1848428556 0.1833487417 -0.0723624669 0.4224817637 -0.0003174026 0.0051611554 -0.0029146419 -0.0044242239 0.0044830821 -0.0080877388 0.0351214432 -0.0353553219 0.0167350801 -0.0236986848 0.0345878034 -0.0668298960 0.1073821999 -0.1624960315 0.2592275163 -0.0244283704 0.0320142258 -0.0522240221 -0.0008504735 0.0037824332 0.0096982044 -0.0044894019 -0.0092991068 0.0111162137 0.0011872680 0.0147622780 -0.0226154865 -0.0116654074 -0.0134651495 -0.0071492604 -0.0159723716 0.0342637098 -0.0600647010 -0.0020924994 0.0010584401 -0.0050430962 0.0020928305 0.0285840854 -0.0152170270 -0.0079629649 0.0257812164 -0.0209678091 0.0638811674 -0.0547348008 0.0087639564 -0.0016164830 0.0109153134 -0.0402983037 -0.0033205213 0.0188023882 -0.0510448307 0.0004631076 -0.0055027920 -0.0060912584 0.0179095295 0.0151508145 -0.0000792188 0.0118160730 -0.0525213000 -0.0596648635 0.0200268738 0.0109604245 0.0099712514 -0.0089946233 0.0287163229 0.0271251630 0.0050791147 -0.0272789740 0.0138171356 0.0075674848 -0.0453671014 -0.0142789414 -0.0057364397 0.0051925044 -0.0021221352 -0.0011370270 -0.0061884083 -0.0053682746 0.0001092128 -0.0014328980 -0.0076348866 0.0069889516 -0.0052882927 0.0016754854 0.0039725843 0.0046453586 0.0045225960 0.0032032144 0.0020461617 0.0075820653 0.0023850864 -0.0152089925 0.0054043345 -0.0090888394 0.0005100280 0.0006901977 -0.0012151551 -0.0024418061 -0.0008164387 -0.0036897217 0.0080818315 -0.0014288400 0.0091483936 -0.0062974319 0.0053324381 -0.0040468526 0.0223369781 -0.0133801154 0.0201824751 -0.0322512219 0.0013773302 -0.0205772474 0.0131983745 -0.0095712231 0.0036461483 -0.0348470457 0.0217228723 -0.0238540158 0.0155647646 0.0088589603 -0.0686062974 0.1207678589 -0.0438593890 0.0146049223 0.0064728786 0.0050899334 -0.0197773010 0.0511074398 -0.0347915419 -0.0048451028 0.0118101816 0.0072907567 -0.0946068258 0.1196641368 -0.0375119259 -0.0037252935 0.0011560242 -0.0016442804 -0.0022146185 0.0018300352 0.0023412862 0.0123335564 -0.0169617299 0.0026544702 0.0118289427 -0.0099508432 0.0157213959 0.0007401477 -0.0054891091 0.0006820680 -0.0029758868 -0.0002198659 0.0012278797 0.0023205623 -0.0035836222 0.0020232044 0.0059612044 0.0016121928 -0.0027348773 -0.0038939793 -0.0022133940 0.0049179244 0.0066372940 -0.0001128872 -0.0028058749 -0.0044322779 0.0034769095 -0.0015328731 -0.0042930744 0.0036060373 0.0004578823 -0.0014476800 0.0028161849 -0.0034956186 -0.0088965078 -0.0028137565 0.0044373901 0.0055919270 -0.0060648242 0.0032074768 -0.0069493208 -0.0053387735 0.0025292272 -0.0004950471 0.0018199270 0.0067156341 0.0097515259 0.0059978581 0.0026540868 -0.0102612321 0.0007541459 0.0007292212 0.0155817483 -0.0016709674 0.0068440525 -0.0018900299 -0.0039478955 -0.0063320015 -0.0088283335 0.0041552646 -0.0087144840 0.0081844940 -0.0034419874 -0.0018591529 -0.0139251146 -0.0037986151 -0.0078245714 -0.0057276016 0.0087228890 0.0016937944 -0.0233050582 -0.0281675480 0.0334584041 -0.0135955930 -0.0085935482 0.0115831917 0.0399242301 0.0480173677 0.0210277385 0.0049224942 0.0084923143 0.0027373591 -0.0489349045 0.0374701952 0.0492045697 0.0368253688 -0.0174429938 0.0034574872 0.0432867987 -0.0195834868 0.0326674914 0.0006525759 0.0016198515 0.0016048478 -0.0121058240 0.0169371916 0.0016267486 -0.0037880861 0.0128456664 -0.0062964229 -0.0062772452 0.0031467962 0.0085194464 -0.0000189279 0.0010023448 -0.0055272346 0.0375381585 -0.0573818176 -0.0106595675 -0.0410463534 0.0041640720 0.0157719146 0.0184194460 0.0080120897 -0.0097911892 -0.0253483128 -0.0314455875 -0.0089057430 -0.0060331180 0.0605358501 0.0685980161 0.0073515835 0.0130724766 0.0384921439 0.0033086405 -0.0033187592 0.0036675776 -0.0044692917 -0.0016809967 -0.0071245258 0.0008194737 0.0004392871 0.0029147379 -0.0075100825 0.0046532791 -0.0048940510 0.0565905746 -0.0282663001 0.0638574933 0.0077129093 -0.0025124678 0.0173597813 0.0012974816 0.0017840402 0.0058103947 -0.0004122778 -0.0004895425 0.0003415042 -0.0000068840 0.0033794553 -0.0041763058 -0.0073562523 0.0026657242 -0.0104800777 -0.0011839484 -0.0010363218 0.0012652614 0.0054125847 -0.0037698891 0.0066811205 -0.0038700692 0.0041364085 -0.0112987069 0.0128744832 -0.0076109768 0.0126985997 0.0115722392 -0.0080235675 0.0206742520 -0.0049898039 0.0053606654 -0.0118168548 -0.0007508353 -0.0025488179 0.0023787081 -0.0261356814 0.0221642948 -0.0528511129 -0.0119862175 0.0074934794 -0.0241687097 0.0052665902 -0.0056804870 0.0072676815 0.0024865147 -0.0014101190 0.0120581695 0.0069941879 0.0020964292 0.0100274912 -0.0082344571 0.0075479452 -0.0263498006 -0.0164979218 0.0030088358 -0.0274342088 0.0558647594 -0.0214706856 0.1249103873 0.0561318992 -0.0225331359 0.1166531427 0.0221830524 0.0007916587 0.0546018834 0.0215170027 -0.0056470317 0.0643575669 0.0590626429 -0.0236144206 0.1365634365 0.0017668208 -0.0006566332 -0.0014393260 -0.0020868281 0.0024437479 -0.0152800204 -0.1374394712 0.1327491518 -0.0656541352 -0.0076205390 0.0112453754 -0.0236787892 0.0374961174 -0.0566448620 0.0891841453 -0.0095506594 0.0120904295 -0.0197186475 -0.0013791970 0.0061663245 -0.0019143533 0.0090537569 -0.0055126439 0.0027962341 -0.0095325765 -0.0037156544 0.0064495925 -0.0039172003 0.0013179280 -0.0079707044 -0.0053192176 0.0123390206 -0.0207042051 -0.0008647990 0.0007498474 -0.0013959338 -0.0026044995 -0.0071621439 0.0008075337 0.0181429198 -0.0284607820 0.0044345281 0.0012193392 -0.0096192747 -0.0032041128 0.0121072040 0.0094915892 -0.0060115289 -0.0005978228 -0.0191680032 0.0402286703 0.0144127792 0.0011242371 -0.0033531678 0.0028275140 0.0159931003 0.0276541415 0.0054669433 -0.0184490694 -0.0025630330 0.0082494900 -0.0304286534 -0.0191227727 -0.0036075908 0.0108899019 0.0103592295 0.0014479393 -0.0097618426 0.0049086092 0.0021554865 -0.0149963167 -0.0042204230 -0.0142759963 -0.0277926170 0.0252341972 0.0091815640 0.0121073320 -0.0115264740 -0.0048551233 -0.0202093039 0.0163256450 0.0026318780 0.0130319472 -0.0104464492 -0.0071949734 -0.0224868875 0.0156550053 0.0062531396 0.0117035154 -0.0143574460 0.0413766500 0.0739689718 -0.0689683797 0.0037566321 -0.0060781663 0.0001811329 0.0072111478 0.0366266597 -0.0230294448 0.0030791595 -0.0051090949 0.0022996781 0.0369461279 0.0725098959 -0.0695588709 0.0192690152 -0.0805701347 0.0559700007 -0.0699211583 0.1246541644 -0.0006356760 0.0842001217 -0.0515425139 0.0387637404 -0.0133424870 0.1251508972 -0.0870395744 0.0910971520 -0.0638076135 -0.0384145878 0.2695633900 -0.4436145535 0.1676132481 -0.0543349069 -0.0139219499 -0.0190809453 0.0704681813 -0.1829731153 0.1236509162 -0.0051891058 -0.0242447094 -0.0392582453 0.3476754228 -0.4326509600 0.1322095410 -0.0031454786 -0.0101463942 0.0077511208 -0.0011619218 -0.0113075749 0.0076742558 -0.0478677695 0.0608804572 -0.0088120635 -0.0443373858 0.0336724073 -0.0600039509 0.0035222948 0.0103155456 -0.0075982783 0.0090347596 -0.0041073245 0.0039779455 0.0051890463 0.0205052377 -0.0065025552 -0.0077686213 -0.0014131516 -0.0012144732 0.0202952972 0.0218242247 -0.0030607564 -0.0014203303 -0.0117386771 0.0033346840 0.0103488975 -0.0215299130 0.0035521128 0.0049577423 -0.0044784236 0.0033460335 0.0114240509 -0.0220675542 0.0042708293 0.0194756183 0.0162692146 -0.0009644001 -0.0204377357 0.0266287570 -0.0121979611 0.0302788234 0.0177811056 -0.0100555330 0.0061907832 -0.0002589850 -0.0272803321 -0.0408809190 -0.0206725985 -0.0080983682 0.0583301396 -0.0008297806 -0.0089859087 -0.0526981856 -0.0007311021 -0.0234308368 0.0021914653 0.0135036866 0.0284208157 0.0337116619 -0.0180307957 0.0298133735 -0.0333723917 0.0105401355 0.0107726109 0.0665890241 0.0085889690 0.0185497706 -0.0017878230 0.0027745471 0.0004959331 -0.0093168070 -0.0100785567 0.0116219855 -0.0036777622 -0.0015096829 0.0039578058 0.0128711914 0.0165732826 0.0076310135 0.0021704943 0.0017186322 0.0007127822 -0.0163651124 0.0170246959 0.0185764782 0.0133285799 -0.0081774407 -0.0000307840 0.0146553743 -0.0077207021 0.0103507909 -0.0174216328 0.0360130843 -0.0171039865 0.0819500616 0.0153820599 0.0283469293 0.0179436992 0.0037419529 -0.0077567670 -0.0197350491 0.0294214687 0.0071355335 -0.0113687609 0.0335245324 -0.0307632427 0.0185766077 -0.0033532839 -0.0030126359 0.0255410240 0.0017835079 -0.0189538974 -0.0027143148 -0.0034399300 -0.0099685495 -0.0266577760 0.0099203623 0.0056871710 0.0253031142 -0.0291116683 -0.0401204627 -0.0002131525 -0.0019386363 0.0110414650 0.0113190448 0.0069678994 0.0188395934 -0.0025244523 -0.0093347878 -0.0070273219 -0.0015320290 -0.0006908567 0.0023102398 -0.0024751573 0.0007235668 -0.0025339054 0.0276375011 -0.0152548691 0.0352729536 -0.0029960437 0.0000604750 -0.0035590106 0.0024504066 -0.0013961884 0.0032994669 -0.0040582888 0.0013967333 -0.0038903490 -0.0005535574 0.0002593458 -0.0018698410 -0.0005000767 0.0012315448 -0.0013797128 0.0009807648 -0.0016144140 0.0035892152 0.0027347507 -0.0014594501 0.0039581542 -0.0078730089 0.0047165697 -0.0138857596 -0.0051349348 0.0037866507 -0.0097116219 0.0009915930 -0.0029929439 0.0030199868 -0.0040741057 0.0014969448 -0.0040649881 0.0029075924 -0.0006673695 0.0040572088 0.0029752210 -0.0005467606 0.0047376419 0.0013023400 -0.0007565748 0.0004603514 -0.0016819944 0.0017722846 -0.0010502186 0.0008816415 0.0007053452 -0.0018416086 -0.0015989575 -0.0008659428 -0.0013487885 -0.0013259477 -0.0013737473 -0.0002041673 0.0006316674 0.0002779419 -0.0007936193 0.0036826295 -0.0001155219 0.0070598540 0.0025178741 0.0033269245 0.0082512958 0.0121750667 -0.0087901133 0.0054816991 0.0054030366 -0.0045483176 0.0107137331 0.0029823122 0.0000854347 0.0107302946 -0.0000495146 -0.0005779293 -0.0008963135 0.0013612891 0.0092491221 -0.0018636684 0.0023240496 -0.0419575418 0.0032969813 0.0026379426 -0.0026927912 0.0090946087 -0.0080769358 0.0148063448 -0.0202941768 0.0005133044 -0.0000667558 -0.0023652305 -0.0049858913 0.0076243927 -0.0202704092 0.0340004051 -0.0080563573 -0.0135524163 -0.0388755847 -0.0160930217 0.0403098812 0.0120794182 0.0126867375 0.0067261564 0.0029369783 -0.0026143545 0.0039610919 0.0007020592 -0.0015539561 -0.0003178409 0.0216285484 -0.0993811407 0.0493385795 0.0448087076 -0.0929070743 0.0592898451 -0.1053905149 0.0913768163 -0.0009514770 0.0624925182 0.0418016975 -0.0582384866 0.0084945637 -0.1116593294 0.1950196065 0.0623356417 -0.0214178516 0.0193566853 -0.0178693807 -0.0187777187 -0.0109219142 -0.0134848297 0.0553898374 0.0604088071 -0.0229077198 -0.0047851792 -0.0080610098 0.0010065248 -0.0033421286 -0.0024635873 -0.0002157782 -0.0004647988 -0.0026385096 -0.0009115272 0.0016192609 0.0012849993 -0.1134166694 -0.1052144934 0.1160397658 0.0295667308 0.0157370913 -0.0879244157 -0.0317832293 -0.1252945156 0.0376162761 0.0607729826 0.0288291963 -0.0413064105 -0.0166198419 -0.0758570437 0.1083743899 0.0422154998 0.0722680726 -0.0170179734 0.2526399876 0.3324277386 -0.3645898272 -0.0104065464 0.0418364636 -0.0674862038 0.0558780134 0.1916946660 -0.1219950772 -0.0087835898 0.0606247664 -0.0218777208 0.2460024508 0.3560855217 -0.3336653477 -0.0072509302 0.0167323659 0.0204865005 0.0092586393 -0.0204019691 0.0285736133 0.0124664087 0.0213223206 0.0043170541 0.0140887104 -0.0277984332 -0.0091835978 -0.0024717184 0.0050232205 -0.0202060258 -0.0380860103 0.1349503314 -0.0190048917 -0.0270132100 0.0232360633 -0.0017926022 -0.0096742119 0.0514587526 -0.0286536877 -0.0386247041 0.0168074160 -0.0195819709 -0.0519871009 0.1271554937 -0.0387729999 -0.0457534871 -0.0612637495 0.0219299546 -0.0262903642 -0.0395952262 0.0632731168 -0.0093884322 -0.0183729982 0.0102204268 0.0048970368 -0.0214412886 -0.0034253471 0.0148400119 -0.0277908937 0.0036771681 -0.0083070011 -0.0221870274 0.0187181238 0.0177593087 0.0009937815 0.0025976689 0.0263134273 0.0177344478 -0.0155857913 -0.0190972030 0.0031989344 0.0036277668 0.0367052928 -0.0115625661 -0.0225620055 -0.0067746781 -0.0250302787 0.0047727596 -0.0248416497 0.0216587803 0.0028316112 0.0326631431 -0.0330190525 -0.0114142755 -0.0276855055 0.0164518697 0.0002234779 0.0095146788 0.0003331428 -0.0024655067 -0.0073631309 -0.0014032657 0.0120454925 -0.0036234610 0.0123576430 0.0001938311 0.0005584907 -0.0004889896 -0.0051997196 0.0120595037 0.0068109191 -0.0057928321 0.0296189551 -0.0179083149 -0.0177880310 0.0039204711 -0.0135072027 0.0131249574 -0.0055990937 0.0037445898 0.0055584712 0.0371060077 -0.0266442441 0.0017559129 0.0245627045 0.0089032884 -0.0089024455 0.0010947888 -0.0001631966 0.0002553438 0.0057762124 0.0069594177 -0.0055867244 0.0014605627 0.0015392327 -0.0044335085 -0.0080309536 -0.0076525033 -0.0033932728 -0.0016076865 0.0003856672 -0.0001210831 0.0066611372 -0.0027278696 -0.0067502600 -0.0050134758 0.0012370369 -0.0024723748 -0.0085088396 0.0021760825 -0.0009504152 0.0017333475 0.0062557968 -0.0027659677 0.0181526335 0.0075949689 0.0030892420 0.0058697931 0.0053329127 -0.0039808538 -0.0041718690 0.0052316534 -0.0000683966 -0.0024233468 0.0053254510 -0.0059044808 0.0088864608 -0.0018751581 -0.0007922410 0.0027642739 0.0038586530 -0.0013366269 0.0002543508 -0.0002087580 -0.0025206893 -0.0053578204 0.0027501523 0.0011846337 0.0024312936 -0.0021804307 -0.0047362485 0.0010513698 -0.0017496410 0.0042794795 -0.0001937529 0.0029895646 0.0070355857 -0.0010672219 -0.0032053378 -0.0032296681 -0.0024214964 0.0012238224 0.0002268962 -0.0013127147 0.0017404555 -0.0019761290 -0.0927027224 0.0516097013 -0.1132036341 0.0115290492 -0.0027800830 0.0159878160 -0.0048052550 0.0039057513 -0.0072887782 0.0047469115 -0.0029949771 0.0069805509 -0.0002975195 0.0006377119 0.0031347946 0.0023998772 -0.0026293144 0.0032458936 -0.0049670313 0.0017206938 -0.0075207191 -0.0062535844 0.0031951309 -0.0078312050 0.0207295721 -0.0096913974 0.0387799178 0.0184744042 -0.0112304928 0.0268413970 0.0026893239 -0.0028233706 0.0040198626 0.0129440476 -0.0050927598 0.0148307037 -0.0071308201 0.0036651055 -0.0114742938 0.0024543129 -0.0061256083 0.0073169350 0.0035721261 -0.0009877600 0.0083627156 0.0013698548 -0.0010611285 0.0016124363 -0.0009075695 0.0000519867 0.0009102364 -0.0005258473 0.0011690255 -0.0035555862 0.0048668357 -0.0009999881 0.0097696626 0.0040672668 -0.0019696276 0.0129937103 -0.0299607600 0.0100773329 -0.0699284048 -0.0221777360 0.0128547553 -0.0504927485 -0.0180924677 0.0049571932 -0.0451668782 -0.0259175928 0.0102134757 -0.0590154698 -0.0322722780 0.0101517457 -0.0788145244 0.0024278012 -0.0025546929 0.0019227658 0.0027346240 -0.0023613572 0.0023095981 -0.0041845129 -0.0025133319 -0.0015313440 -0.0021729118 0.0008430594 -0.0113792436 0.0033731611 -0.0091487327 0.0100726947 0.0041416155 -0.0071814653 0.0105213315 0.0207483253 -0.0221906832 0.0592843077 -0.1063867825 0.0213726936 0.0468278385 0.0893333508 0.0412081831 -0.1138589138 -0.0180346388 -0.0303811393 -0.0235568094 -0.0075637312 0.0005061976 0.0002641082 -0.0016183010 0.0037073119 0.0020618759 -0.0686021704 0.3193158849 -0.1581927208 -0.1398388766 0.2932858427 -0.1907522676 0.3410426511 -0.2983431402 0.0060335088 -0.1513721849 -0.0909883113 0.1439897450 -0.0242461340 0.2812865521 -0.4499034584 -0.1346101185 0.0912655834 -0.0991788735 0.0246386948 0.0162259998 0.0154879859 0.0226705907 -0.1007662922 -0.0999792137 0.0389770720 -0.0326035899 -0.0131978466 -0.0000133754 0.0026417303 0.0010900303 0.0003793307 0.0089142260 0.0066987900 0.0023787645 0.0015398915 -0.0016622350 -0.0197459496 -0.0266972398 0.0264538553 0.0048593570 0.0046811287 -0.0129616350 -0.0073983826 -0.0220674363 0.0108439880 0.0077291434 0.0086244226 -0.0087680725 -0.0049694411 -0.0169489125 0.0185145297 0.0071205978 0.0119841675 -0.0057725195 0.0420117862 0.0645261638 -0.0667533426 -0.0025148676 0.0025701212 -0.0063010894 0.0092136189 0.0326267200 -0.0202416355 -0.0025977592 0.0018421723 0.0009557686 0.0427175123 0.0692143688 -0.0643099555 -0.0002143123 -0.0022482544 0.0057348146 -0.0017450783 0.0002551928 0.0050652608 0.0047881592 0.0019170535 0.0021270128 0.0015582833 -0.0006449971 -0.0046628215 0.0025745892 -0.0017967910 -0.0048568602 0.0010543635 0.0108193327 0.0008712930 -0.0103237373 0.0081160938 -0.0028484130 0.0008632495 0.0034435298 -0.0009085689 -0.0081517764 0.0028901244 -0.0050639316 0.0016309422 0.0081686212 -0.0031292487 -0.0059334386 -0.0105830641 0.0038646444 -0.0035723309 -0.0070295754 0.0094267677 -0.0032537383 -0.0012199733 0.0016506349 -0.0003019651 -0.0026514850 -0.0026207983 0.0018926576 -0.0044905403 0.0012340928 -0.0015152500 -0.0043214054 0.0030742347 0.0012465211 -0.0011364249 0.0013670357 0.0030174141 0.0031403248 -0.0016784017 -0.0059475370 -0.0023325870 -0.0022764533 0.0028812828 -0.0008491535 -0.0071388639 -0.0000283718 -0.0045911677 0.0012797774 -0.0030507042 0.0035314530 0.0003296841 0.0063148238 -0.0066608830 -0.0032509751 -0.0031780894 0.0027580748 -0.0043984138 -0.0002963304 0.0009784844 -0.0004561021 0.0005644789 -0.0002863407 0.0005566959 -0.0008598112 -0.0002963609 -0.0014375610 -0.0026217473 -0.0009774860 -0.0010551908 0.0046379602 -0.0020431335 -0.0028997379 0.0013030654 -0.0017121172 -0.0054582083 0.0002005591 -0.0004292654 0.0029684529 0.0013501148 -0.0000561463 0.0019035711 0.0029548947 -0.0020570150 0.0011269993 0.0079652822 0.0012999257 -0.0012469741 -0.0013436710 -0.0011604161 -0.0008656442 -0.0117967771 -0.0120743754 0.0078789490 -0.0000621772 -0.0004536344 0.0080641718 0.0106001427 0.0094588958 0.0046906187 0.0045646681 -0.0032752384 0.0001630580 -0.0066236683 -0.0032553072 0.0078052047 0.0054711971 0.0029618333 0.0086769829 0.0141794615 -0.0002616100 -0.0063312572 -0.0010601549 0.0004709976 0.0010225439 -0.0021157696 0.0004854672 0.0003808857 -0.0011536583 0.0001982209 -0.0000971209 0.0005814701 -0.0018812308 0.0021871920 0.0020241296 -0.0010600454 -0.0014783362 -0.0002782351 -0.0029332405 -0.0021036698 -0.0024465218 -0.0024499340 0.0011508196 0.0009873806 -0.0002242614 0.0009645674 -0.0011779063 0.0005003734 0.0020478826 0.0022666940 0.0000608955 0.0018991925 -0.0003084803 0.0017101770 -0.0011927929 0.0006484646 0.0005034067 -0.0010695452 0.0003608761 0.0015616101 -0.0002244549 -0.0010454312 -0.0029661496 0.0004870478 0.0008865198 -0.0022160068 0.0014397455 0.4068373759 -0.2282238772 0.4958823543 -0.0506086886 0.0159265403 -0.0694384776 0.0267093498 -0.0185020709 0.0446402407 -0.0378140157 0.0217591238 -0.0550239917 -0.0020529656 0.0008159838 -0.0178468532 -0.0178641822 0.0138040123 -0.0257800275 0.0243799331 -0.0107233275 0.0374460858 0.0430346195 -0.0212000911 0.0579868895 -0.1231142290 0.0600340747 -0.2229201074 -0.0771837451 0.0458256742 -0.1171263534 0.0244318082 -0.0089202007 0.0377595265 -0.0494830333 0.0176325824 -0.0560256511 0.0291841213 -0.0131210750 0.0472040782 -0.0192414204 0.0356841240 -0.0401627323 -0.0052732842 0.0020089326 -0.0128160369 -0.0091364606 0.0058654924 -0.0157398315 -0.0006054586 0.0013233517 -0.0139268720 -0.0017236243 -0.0051767442 0.0051760058 -0.0145042429 -0.0001336461 -0.0261596426 -0.0102753940 0.0055080464 -0.0395299329 0.1005641387 -0.0334957669 0.2347267111 0.0690551933 -0.0391104500 0.1610211083 0.0773948421 -0.0269310014 0.1725698960 0.1057396838 -0.0432432636 0.2391445005 0.1119449074 -0.0343782518 0.2733213892 -0.0078370197 0.0099694222 -0.0111003158 -0.0120462926 0.0272321949 -0.0090413012 -0.0002323624 0.0036598113 -0.0005452264 0.0200988767 -0.0172140990 0.0654516502 -0.0541065028 0.0958362309 -0.1192173400 0.0226479181 -0.0219647618 0.0209385056 0.0044221851 -0.0118452049 0.0248945949 -0.0285459391 0.0120867528 0.0093555207 0.0049682298 0.0111496023 -0.0406906770 0.0015801827 -0.0098666130 -0.0050457941 0.0023141249 -0.0210432741 0.0273693509 0.0036829702 -0.0101050781 -0.0017299741 -0.0251864980 0.0778974089 -0.0370454455 -0.0350818318 0.0684011511 -0.0424120693 0.0612833931 -0.0532209888 -0.0003545712 0.0028043789 0.0150976318 0.0005679908 -0.0049774012 0.0313752338 -0.0791169263 0.0010801886 0.0516765465 -0.0735710854 -0.0026204860 -0.0183348929 -0.0194480093 -0.0010608264 -0.0051970047 -0.0083712558 -0.0016260432 -0.0059083476 -0.0043864112 0.0149427451 -0.0311745918 -0.0258236729 0.0030835914 0.0181871428 -0.0059657743 0.0026727943 0.0032079583 -0.0005052232 -0.0015445897 0.0017942837 -0.0008956359 -0.0002971702 -0.0028141767 -0.0019415926 0.0001024796 -0.0000246580 -0.0030904249 0.0025914845 -0.0014932762 0.0005488624 0.0009830696 0.0023724029 0.0019127487 0.0010081312 0.0011014830 0.0025331600 0.0005912977 -0.0081306574 0.0040633748 -0.0064834998 -0.0015823536 0.0041148456 -0.0021232787 -0.0028555184 0.0002620995 -0.0035377162 0.0003237997 0.0023927290 0.0018888349 -0.0046097179 0.0041300937 0.0016170561 -0.0007186341 -0.0018220679 0.0002573458 0.0030040260 -0.0027442246 -0.0009305333 -0.0024932886 -0.0001331529 -0.0012864254 0.0017173729 0.0013483313 0.0004429005 -0.0010816175 0.0017821711 0.0060201505 -0.0113113693 0.0016041452 0.0036317160 -0.0014911697 -0.0000065340 0.0000689569 -0.0040386410 0.0013951975 -0.0000391738 0.0035902174 0.0006890803 0.0019458952 -0.0077529077 0.0015106312 -0.0008274508 0.0016345994 -0.0003609963 -0.0001683458 0.0005948954 0.0000992358 0.0015016442 0.0010475224 -0.0009703257 -0.0002417375 0.0015337876 0.0010200274 0.0001403186 0.0002835284 -0.0013903002 0.0003287900 -0.0001705257 0.0012171247 0.0012406235 0.0015552287 -0.0003059000 0.0005884745 -0.0001897748 -0.0010568191 0.0023988846 0.0027394029 0.0025995327 0.0018895001 -0.0014548771 0.0011113743 -0.0003653487 -0.0010234865 -0.0004216119 -0.0006213038 0.0003695345 0.0006276651 0.0001589336 -0.0011458384 -0.0006050964 -0.0002637337 0.0010838256 0.0026087961 -0.0009627283 0.0002813979 0.0004444659 0.0011189618 0.0000198946 -0.0011284692 0.0008771034 -0.0000844951 0.0000537280 -0.0003372602 0.0005834937 0.0009894413 0.0027939544 -0.0008435946 -0.0007945394 -0.0000802107 0.0001224103 0.0013800838 -0.0009879740 0.0011091409 -0.0006665713 0.0003483420 -0.0005310479 -0.0008597092 -0.0027741503 0.0017227636 -0.0002599590 0.0001287781 -0.0023172297 -0.0011718330 0.0051840268 -0.0000211727 0.0036046794 0.0423007158 0.0526300174 -0.0385958625 0.0059670778 0.0079742779 -0.0321972935 -0.0578410151 -0.0520135894 -0.0221040314 -0.0032817361 -0.0028568650 0.0030258180 0.0666033458 -0.0338449140 -0.0570209605 -0.0374075288 0.0089963474 -0.0173831821 -0.0583977688 0.0237739547 -0.0200849061 0.0335289839 0.0363472105 0.1406067262 -0.0034400780 -0.0957676845 -0.1518017015 0.0165886609 -0.0383494207 -0.0095562777 -0.0333565480 0.1214442804 -0.0214720316 -0.0756619905 -0.0096768757 -0.1222979195 0.1901287303 -0.0399171809 -0.0498361585 0.0047740886 0.1293298521 0.0011106448 0.0096938598 -0.0545800928 0.0066222618 -0.0997039380 0.0498275619 0.0727008946 0.0561747174 -0.0751058112 -0.0029985830 0.0451687327 -0.0486980588 0.0419790955 -0.0301210223 -0.0722189073 -0.0058233029 -0.0243749406 0.0696859752 0.0145226151 0.0063861515 -0.0085259283 0.0039754166 -0.0086691893 -0.0019069542 -0.0177556591 0.0138048442 -0.0082197296 0.0193622686 -0.0020665707 0.0022077736 -0.0003741959 0.0015847765 0.0000916741 0.0060834850 -0.0016543379 0.0019860544 -0.0054497567 -0.0017926936 0.0014804526 -0.0016607645 -0.0020057620 -0.0011551044 -0.0024414664 0.0038381652 -0.0011003163 0.0001157931 0.0038096440 -0.0007824371 0.0054363012 -0.0071076820 0.0021353518 -0.0113621304 -0.0001174121 -0.0019227159 0.0007130061 0.0083012365 -0.0023425193 0.0072845475 -0.0016595728 0.0000965152 -0.0014274559 0.0011054065 0.0001404803 0.0017136394 -0.0009706659 0.0021430516 -0.0008932947 0.0003542317 0.0002627300 0.0024827832 -0.0004287582 -0.0000001883 -0.0020874533 -0.0011792000 -0.0004514985 -0.0014321880 -0.0008227067 0.0004693656 -0.0014869146 0.0000473298 0.0004036423 -0.0005530350 0.0003272067 -0.0001552750 -0.0003090938 0.0010539671 -0.0012065431 0.0038446321 0.0018924789 -0.0040662863 0.0041538768 0.0029157580 0.0004365969 0.0128977833 0.0049577799 -0.0005755085 0.0107322471 0.0037825745 -0.0019411642 0.0093712620 0.0009035099 -0.0007452173 0.0011155137 -0.0031463386 0.0010609166 -0.0425361611 -0.0763996472 -0.0636554090 -0.0301031827 0.0008120742 -0.0007737902 0.0014755709 -0.0019789774 0.0019008801 -0.0033742404 0.0005511913 0.0005505662 0.0002781103 -0.0004791733 -0.0013391578 0.0025571171 0.0034483823 0.0034907628 -0.0037783990 -0.0018999370 0.0007145825 -0.0047152772 0.0024036883 -0.0032281104 0.0025800141 -0.0001802987 -0.0006438563 0.0008663682 0.0001135035 -0.0000961340 -0.0000228974 -0.0015818865 -0.0141552360 0.0076549248 0.0063909067 -0.0159703478 0.0111965164 -0.0271262674 0.0272699542 0.0002907630 0.0147229924 0.0104106703 -0.0194289512 0.0017912458 -0.0062028984 0.0115106900 0.0026292408 0.0010479595 -0.0061224135 -0.0017929401 -0.0129143870 -0.0209924394 -0.0031993282 0.0082261309 -0.0007518785 -0.0053033341 0.0162514209 0.0092520844 0.0005399248 -0.0008228194 -0.0008538055 0.0002007685 0.0009376473 0.0000431117 0.0000038560 0.0002880775 0.0000504410 0.0981654556 -0.0330730996 -0.0109195248 0.0063602394 0.0533304595 0.0907218857 0.0143538005 0.0698257533 0.0815563806 -0.1144176656 0.0289828884 0.0210764506 -0.0013380107 -0.0774359469 -0.0985448755 -0.0219068205 -0.0896143378 -0.0896321374 -0.1026047595 0.0941085541 0.0130472323 0.1156606565 0.0277199457 -0.0018201023 -0.0397325239 0.0158998314 -0.0015472468 0.1766387826 -0.0561743031 -0.0586584187 -0.1051979316 -0.0327219035 -0.0348511299 -0.0187137977 -0.0021977767 0.1195402463 -0.0230626203 -0.0098297755 0.1201197774 0.1085759106 0.0346159239 0.0471157368 0.0306829636 -0.0516809573 -0.1088115119 0.0405152300 -0.0495163732 -0.1124479679 -0.0153834253 0.2888682256 0.0183635173 -0.1992047246 0.1461587337 -0.0424421102 0.0035892751 0.1359194245 -0.0567445990 -0.2442293052 0.1236346866 -0.1447249371 -0.0445697753 0.2801207921 -0.1116410687 0.0639077496 0.0091379644 0.0407767302 0.0311078246 -0.0447730966 -0.0537920376 -0.0630623176 -0.0441665154 0.0465963247 0.0031834509 -0.0766755704 -0.0487433350 -0.0181169842 -0.0262754245 -0.0206056307 0.0085775301 0.0449775169 0.0272888472 -0.0363020093 -0.0278934009 0.0394360208 -0.0376941059 -0.0202648463 -0.0228394801 -0.0287091772 0.0075075466 0.1330630791 -0.0721238815 0.0635736386 -0.0154149112 0.0170455124 0.0108664948 -0.0401771912 0.0521620805 -0.0082384162 0.0242716324 -0.0294121471 0.0012355126 -0.0706162464 0.0673776093 0.0179121919 0.0556804762 -0.0499632843 0.0551268223 0.0124996847 0.0529431199 -0.0338892339 -0.0190535082 0.0219365917 -0.0105554250 -0.0487468967 -0.0713376534 -0.0128435677 -0.0062358577 0.1186397514 -0.0316435550 -0.0561456991 -0.1060222162 0.0171090496 -0.0060875560 -0.0121045186 0.0011000033 0.0529597281 0.0585828593 -0.0230740899 0.0032502522 -0.1205705461 0.0571876296 0.1220323307 0.0723171103 0.0518121141 0.0132121848 -0.0007635609 -0.0006900802 0.0000447747 -0.0018089814 -0.0003155664 -0.0000908897 0.0002625689 0.0011458576 0.0003196550 -0.0026297031 -0.0014376605 -0.0002056005 0.0010927652 0.0006401977 -0.0005111397 -0.0027691914 0.0000319472 0.0020518369 0.0065818662 -0.0026882601 0.0009894935 -0.0021638722 0.0013127095 -0.0007972761 0.0016002893 0.0037233773 0.0011292640 0.0013740698 0.0030084690 -0.0067716213 0.0016855785 0.0047950560 -0.0019302472 -0.0047047105 0.0043068906 0.0016846055 -0.0065185562 0.0012263828 -0.0035153342 -0.0052767558 -0.0016983525 -0.0000705344 -0.0005318792 -0.0026385953 -0.0043532299 -0.0005675080 -0.0045847589 0.0028836585 0.0001297244 -0.0039039286 0.0008673885 -0.0044577603 -0.0016177997 0.0064753822 -0.0047341562 0.0055948324 -0.0017173415 -0.0046454598 -0.0087145985 -0.0007882523 0.0021321500 0.0002706858 0.0008459827 0.0027596062 0.0011444594 -0.0004271597 0.0009477685 0.0038074175 -0.0001615658 0.2243477432 -0.1192483661 0.2662048909 -0.1247002162 0.0615267436 -0.2164198868 -0.0253716642 0.0085332977 -0.0582756336 0.1061538360 -0.0582413773 0.1586408036 0.0325290380 -0.0260594051 0.0585884562 0.0662097126 -0.0250626191 0.1020556547 -0.0051805247 0.0079459845 -0.0054140370 -0.1351150044 0.0714470711 -0.2085359790 0.1442854666 -0.0856493292 0.2438462137 -0.1592767797 0.0966184556 -0.2468911544 -0.3406162931 0.1950252187 -0.5119061536 -0.0453260180 0.0253441705 -0.0554297475 0.0065707142 0.0000949451 0.0147035731 0.0003878299 0.0071702662 0.0116983205 0.0024170049 -0.0034932584 0.0013896438 -0.0071349059 0.0074313765 -0.0076139843 0.0031480622 0.0013944500 -0.0112009672 -0.0033371824 -0.0059886427 0.0031341804 -0.0071357381 -0.0057008497 -0.0052016478 0.0037648934 0.0021388332 -0.0143662461 0.0329059899 -0.0077724001 0.0709849334 0.0073824069 -0.0090273992 0.0284866146 0.0290080630 -0.0186578829 0.0563032793 0.0478415200 -0.0245953221 0.0909709155 0.0348255315 -0.0069279121 0.0935314115 0.0205131311 -0.0071179993 0.0346165112 0.0279797225 -0.1001189143 0.0103539792 -0.0029283847 0.0053127758 -0.0016030331 0.0031966765 -0.0026535098 0.0148785102 -0.0091500791 0.0183163070 -0.0185046889 0.0059518569 -0.0041940226 0.0009708150 -0.0002640714 -0.0009827700 0.0106411371 -0.0051569015 0.0017213590 0.0035337096 -0.0067266168 0.0043005323 -0.0132343452 0.0064554472 -0.0054158069 -0.0055167577 -0.0007894877 -0.0039321404 0.0043838255 0.0009439014 -0.0033171180 -0.0011649988 -0.0071612883 0.0174565641 -0.0081670808 -0.0051049692 0.0114114755 -0.0089459428 0.0163498022 -0.0155213165 0.0002376460 0.0213464623 0.0225910891 -0.0243376661 0.0013700034 -0.0130643878 0.0065440515 0.0173844031 0.0200940006 -0.0327615376 -0.0095549225 -0.0250361664 -0.0221211012 -0.0056440838 0.0144052701 0.0145272142 -0.0105755975 -0.0142599412 -0.0133581291 0.0039413362 -0.0078680808 -0.0063641904 0.0015638803 0.0041509987 -0.0004905803 0.0014688608 -0.0022181399 -0.0015121771 0.0022957130 -0.0027873219 0.0008188588 0.0017002617 0.0020316266 0.0029252705 0.0023883433 0.0036278088 0.0021444417 -0.0047394506 -0.0010161684 0.0022346279 -0.0004280049 -0.0044403251 -0.0020092934 -0.0013314062 -0.0041488081 -0.0024765471 -0.0044995492 0.0036220491 -0.0006586422 0.0074569229 -0.0043137636 0.0006574747 -0.0015103090 0.0051157867 -0.0032616088 0.0115399554 0.0089420115 -0.0110170987 0.0021708963 0.0099442363 -0.0118064208 0.0020476725 -0.0009055577 -0.0000862918 0.0006198453 0.0026995419 -0.0015268903 0.0013589754 -0.0046303208 0.0011794510 0.0001928173 0.0019423408 0.0013318649 0.0020077099 0.0002565803 0.0005756222 0.0076010364 -0.0106504493 0.0029801377 0.0005315346 0.0040005763 -0.0012872630 -0.0030460650 -0.0009944494 -0.0009016565 -0.0027778205 0.0029583009 0.0011953109 0.0085254686 -0.0111045497 0.0042351472 0.0020257797 -0.0003277200 0.0030269568 0.0011108035 -0.0034464997 -0.0012915525 0.0021847769 -0.0000808090 -0.0009949330 -0.0007308601 0.0017213143 0.0014494624 0.0000971506 0.0012611605 -0.0019182285 0.0013564988 0.0005407295 0.0036798929 -0.0006311848 0.0026551795 -0.0016556055 -0.0034500028 -0.0012867020 -0.0021381279 0.0044596267 0.0083553272 0.0128824858 -0.0012920208 0.0052832341 0.0126027083 0.0034672131 -0.0054020192 -0.0013026020 0.0035452626 -0.0017390055 0.0002493395 0.0058240432 -0.0034664097 0.0045918334 0.0099696646 0.0087940699 0.0110328396 0.0045773264 -0.0001203060 -0.0029715801 -0.0007936422 -0.0010276620 0.0017448841 -0.0001535991 0.0068967136 0.0019181361 0.0010789376 0.0013940754 0.0010283119 0.0107927257 0.0033994777 -0.0017604835 0.0194432359 -0.0107487784 -0.0050450083 -0.0011309677 -0.0027233513 0.0029855905 -0.0037208438 0.0009805184 0.0009244571 0.0165291432 -0.0110654179 -0.0060004730 0.0149080166 -0.0065417131 -0.0105426234 -0.0039810731 -0.0026260258 0.0046341924 0.0118402083 0.0154865001 -0.0099609735 -0.0041730691 -0.0009093767 -0.0037176511 -0.0179028119 -0.0132373802 -0.0003368595 0.0002675903 0.0023278018 -0.0041571636 0.0171079401 -0.0036163229 -0.0177818914 0.0004000159 -0.0027650005 -0.0094586219 -0.0183288984 0.0086011331 -0.0067365844 0.0000859892 -0.0378471754 -0.0645400077 -0.0127600822 0.0611701846 0.0788613149 -0.0097704188 0.0259683449 -0.0073310514 0.0265960403 -0.0924920785 -0.0086067264 0.0723979007 -0.0005182601 0.0949048698 0.1328736056 -0.0814917506 -0.0390088330 -0.0499332497 -0.0080385287 0.0875191960 0.0314346744 0.0617375938 -0.0476781984 -0.0578758087 0.0611544641 0.0191665620 -0.0128620937 0.1103779616 0.0101014651 0.0163563776 -0.0107238069 0.0820384233 0.0313769292 0.0508901755 0.0050646972 -0.0294432802 -0.0195978212 -0.0247890126 -0.0105362843 -0.0094270910 0.0213205877 -0.0121331711 0.0233615823 -0.0310759821 -0.0197965128 0.0113184764 -0.0160546599 -0.0568427263 0.0421645614 -0.0988082438 0.0053850880 -0.0009507888 0.0142115923 -0.0035257694 0.0032503001 -0.0091313004 0.0034839952 -0.0010353767 0.0131242063 0.0071939610 -0.0067485853 0.0115677534 0.0098315173 -0.0046173901 0.0099592768 -0.0104534475 0.0069308398 -0.0163542217 -0.0374145171 0.0149192058 -0.0579837298 -0.0675336576 0.0343346199 -0.1144544657 -0.0465460595 0.0311943094 -0.0736013595 0.0059204800 -0.0031538453 0.0032739184 -0.0007605322 -0.0014131904 -0.0022843095 0.0035137390 -0.0053109394 0.0037995113 -0.0032106113 0.0014469137 -0.0073472083 0.0028742622 -0.0024175547 0.0048863158 0.0003197395 -0.0002906856 0.0052956247 0.0036285864 0.0009367820 0.0043713648 0.0009838491 0.0017822491 -0.0007012329 -0.0026947860 0.0001078779 0.0009928071 -0.0036957933 0.0008681337 -0.0060637787 -0.0013717815 0.0038542138 -0.0068209778 -0.0127956000 0.0068489661 -0.0240976991 -0.0139196696 0.0065467517 -0.0258733159 -0.0071862760 0.0016303781 -0.0211539905 0.0072606833 -0.0053094669 0.0070741007 -0.0009408646 -0.0039503467 -0.0642147761 -0.0240907411 0.0450741859 -0.0158592549 0.0013114318 -0.0016726672 0.0002192003 -0.0010236940 0.0004578034 -0.0014208243 -0.0014766746 -0.0010724480 0.0007213148 -0.0011439527 0.0022232001 -0.0043554075 0.0025900506 -0.0046984374 -0.0024784941 0.0004474234 -0.0025346008 0.0081551976 -0.0007950399 0.0039132717 -0.0003960064 0.0011747099 -0.0003192184 0.0000328102 0.0000031932 0.0009332854 0.0004450826 0.0141018477 -0.0124745216 0.0063622831 -0.0022087198 0.0026742743 0.0032400543 0.0007895068 0.0002848708 0.0006663798 -0.0087771339 -0.0089634408 0.0090538470 -0.0001026278 -0.0010935388 0.0043963596 -0.0021508038 -0.0083076416 0.0138436736 -0.0000831876 0.0082028446 0.0137281769 0.0010050196 -0.0004338597 0.0055027072 0.0016248283 -0.0083109512 -0.0051023502 -0.0005754751 0.0006907253 0.0001592179 -0.0003834801 -0.0007136190 -0.0005507005 -0.0003415213 0.0011132580 0.0006146704 -0.0459156375 -0.0020531814 0.0166578613 -0.0052753829 -0.0123817701 -0.0465811850 -0.0127395547 -0.0266930281 -0.0406175584 0.0599858288 0.0142418124 -0.0317932377 -0.0043818710 0.0464615079 0.0445459655 0.0107009482 0.0545643974 0.0307694552 0.0200665412 -0.0686819271 0.0228374542 -0.0928202852 -0.0854867329 0.0704825651 0.0102385949 -0.0722691337 0.0406057826 -0.1305707183 -0.0580420392 0.1040186447 0.0188135176 -0.0220199444 0.0565097807 0.0282269036 -0.0301340380 0.0075270008 0.0079932668 0.0069961596 0.0038296735 0.0220416270 -0.0558208000 0.0175020003 -0.0073378109 -0.0089988250 0.0032882048 0.0141448201 -0.0432365044 0.0029866239 -0.0316091804 0.1039595132 -0.0361053884 -0.0772723830 0.2137623109 -0.0414059409 -0.0330639131 0.1014108661 -0.0592907949 -0.1316751179 0.2200259474 -0.0620413681 -0.0719445644 0.1002947541 -0.0498292715 -0.0254312198 0.0127276511 -0.0339204547 -0.0089070655 0.0409701988 0.0149834032 0.0107101411 -0.0315849572 0.0144133406 0.0114935959 -0.0302597825 0.0163136281 0.0062416776 0.0257897171 0.0387399231 -0.0195367594 -0.0503304476 -0.0782421252 0.0171574504 0.0064406742 -0.0020315514 0.0336863317 0.0285722839 0.0581348235 -0.0319883489 -0.1172905943 -0.3154700537 0.0030496709 -0.1089783734 -0.2112401524 -0.0089255417 0.0220636523 0.0541738390 -0.0302513287 0.0080300925 -0.0176616412 -0.0112506358 0.0003216851 -0.0024406253 -0.0864340452 -0.0988429933 -0.2479814547 -0.1209778608 0.0377571163 0.0678314712 0.0881761920 -0.0095925482 -0.0769569953 0.0194716924 -0.0937935290 -0.0410933472 -0.0730080459 -0.0049580883 0.0154857463 0.0942045169 -0.1368898437 -0.0940097165 -0.1885492319 0.0991471844 0.0067654124 -0.0196254586 0.0714604587 -0.0175891052 0.0859242780 -0.0328979697 -0.0140887893 -0.2846986137 0.1842263312 0.0936596573 -0.0477566935 0.0085296209 0.0647120739 0.0012927740 0.0005619086 0.0000827437 -0.0007977845 0.0011624462 -0.0002711686 0.0033643733 0.0045288991 0.0003422600 -0.0013087195 0.0004019314 0.0004393216 0.0001252882 -0.0010011967 0.0007984903 0.0010430396 -0.0013893300 -0.0000137239 -0.0027741201 0.0028734876 0.0029612348 -0.0027712479 0.0029480195 -0.0036499786 0.0057045535 0.0096560477 0.0140137939 -0.0113464355 0.0170914422 -0.0248880691 -0.0009026814 0.0211920946 -0.0110239248 -0.0112984569 -0.0104354905 0.0109855316 -0.0063523048 -0.0104150525 -0.0190575375 -0.0163172169 -0.0075612011 0.0034511037 -0.0217310048 -0.0115211533 0.0128905514 0.0104362982 0.0046682462 -0.0064287413 -0.0108002886 0.0041538217 0.0087190606 -0.1485473495 0.1196641839 0.1183407749 -0.0014933619 0.0058377675 -0.0003967225 -0.0075863163 -0.0065729199 0.0062825975 0.0047132140 -0.0010486020 0.0003675419 0.0026638679 0.0031889339 -0.0020947701 -0.0003721527 -0.0010764369 0.0024564482 -0.0139947580 0.0073732956 -0.0171778270 -0.0115983943 0.0062454930 -0.0197494086 0.0029939387 -0.0022032082 0.0045418410 -0.0050358388 0.0030530380 -0.0075982682 -0.0000230093 -0.0003942297 0.0005960915 0.0000714879 0.0001767281 -0.0001318358 0.0022382153 -0.0010247535 0.0033158703 0.0020152794 -0.0009796766 0.0031904602 -0.0144344688 0.0078509525 -0.0232231203 -0.0137700149 0.0076414650 -0.0217238196 -0.0015102584 0.0011565440 -0.0023230285 0.0030000202 -0.0017751436 0.0034832708 -0.0007606201 -0.0001406062 -0.0012187544 0.0007916608 -0.0016762228 0.0014076697 -0.0007086743 0.0003701980 -0.0014277165 0.0008765531 -0.0006460585 0.0014662164 0.0001443794 -0.0002040725 0.0015651945 0.0006663338 0.0003847480 0.0005818976 0.0004011441 0.0005181394 0.0001601725 -0.0002401853 -0.0001507518 0.0009464108 -0.0027340273 0.0007293166 -0.0059770794 -0.0007263279 0.0007524078 -0.0025899737 -0.0040186534 0.0020708792 -0.0075853697 -0.0052440856 0.0023901924 -0.0110461706 -0.0038257329 0.0008887250 -0.0096714167 -0.0007226679 0.0002409606 -0.0004548762 0.0005320625 0.0001042978 0.0115889293 0.0006605316 0.0130408745 -0.0019133770 -0.0000985318 -0.0000237805 -0.0005862011 0.0004977901 -0.0006506801 0.0006314015 -0.0006348925 0.0001810802 0.0002038123 0.0004884132 -0.0005999005 -0.0014252880 0.0004230643 0.0003880812 -0.0007512383 0.0002962141 -0.0008200841 0.0013090438 -0.0018381140 0.0011317543 0.0014418012 0.0003705174 0.0001872193 -0.0002131574 -0.0000613600 0.0002143006 0.0000633277 0.0002177647 -0.0023422264 0.0010972433 0.0003314339 -0.0013706932 0.0016334353 -0.0044285649 0.0045910629 0.0001510537 -0.0012056391 -0.0016436847 0.0037595218 0.0000211291 -0.0003347916 0.0009906373 -0.0008620801 -0.0010425373 0.0018196731 0.0025068854 0.0062170901 0.0051990012 0.0016042092 -0.0045599768 -0.0044084196 0.0031547334 0.0041334949 0.0039060443 -0.0003088438 0.0004842421 0.0003837413 -0.0002312143 -0.0005603402 -0.0002684333 -0.0001776963 0.0004259944 0.0001363109 -0.0020386972 -0.0045313303 0.0038287066 -0.0009769589 0.0030394875 -0.0029588335 -0.0026031146 0.0005920056 0.0005281619 0.0010142265 0.0053478235 -0.0034277778 0.0023482942 -0.0016971723 -0.0012441043 0.0026324534 0.0006358855 -0.0038304329 -0.0053011798 -0.0009201789 -0.0001530218 -0.0081129512 -0.0108695980 0.0118288097 -0.0018465563 -0.0089620014 0.0054121934 -0.0005956736 -0.0175122042 0.0132921705 -0.0009203394 -0.0089275764 0.0034753608 0.0132139592 -0.0052110257 -0.0103613487 0.0111402982 0.0036607205 -0.0089213570 -0.0052293334 -0.0138610004 0.0005420651 -0.0051790392 0.0002014754 0.0109136843 -0.0003123853 -0.0062692154 0.0076262743 -0.0058582878 0.0123634804 -0.0157480086 0.0084059458 0.0459005479 -0.0012248758 -0.0090385958 0.0136288327 -0.0109875664 -0.0142268718 0.0400955885 -0.0013769943 -0.0179386847 0.0053694257 -0.0081580344 0.0008614409 0.0023246488 -0.0019940276 0.0001848507 0.0025002934 -0.0020788168 0.0075285935 -0.0050837004 -0.0015439056 0.0029132596 -0.0010916982 0.0081533122 0.0011755107 0.0098051599 -0.0075859184 0.0029378384 -0.0044255548 0.0125435297 0.0049427078 0.0172234862 -0.0071345759 -0.0057596960 -0.0018927785 -0.0043746180 0.0224213292 0.0263840089 0.0158515436 0.0029001165 -0.0031817998 0.0186943750 0.0096232838 -0.0206201485 0.0009511272 0.0066668393 -0.0034427139 0.0027390539 0.0170873106 -0.0190789228 0.0092985088 0.0225620599 0.0201630212 0.0087611509 0.0189096075 -0.0132061095 -0.0089455122 0.0717898347 -0.0379550686 -0.0478115268 -0.0375737460 0.0162301787 0.0249816580 -0.0558868492 0.0317258035 0.0380533998 0.3342660080 -0.1576932184 -0.1936552596 0.4197722680 -0.1993758850 -0.2626614155 -0.0638526225 0.0338958469 0.0369739906 -0.0307794813 0.0170380124 0.0127795535 0.2372974213 -0.1291297946 -0.1593382960 0.4494384793 -0.2345343370 -0.2983310701 0.0001516274 0.0000306043 -0.0000822365 -0.0004902232 -0.0004467018 0.0002931314 0.0003667610 0.0004273027 0.0002605739 0.0003605116 0.0004101875 0.0001576740 -0.0000481759 -0.0000453175 0.0002056969 -0.0013316681 -0.0000789536 0.0011044854 0.0005795087 -0.0001117165 0.0005919362 0.0000983517 0.0000613906 0.0000240883 0.0203536284 0.0274201078 0.0309818964 -0.0108901189 -0.0047379972 -0.1781949000 0.0092073964 0.0536750959 -0.0205569978 -0.0157355099 -0.0345790839 0.0170012835 -0.0128416796 -0.0412531192 -0.0655140446 0.0125541339 -0.0363105687 -0.0102934390 -0.0116817718 -0.0384390581 0.0164279588 0.0067813880 0.0298958774 -0.0255197136 -0.0189361373 0.0122018358 -0.0067974660 0.0317603565 0.0125611607 -0.0463049024 -0.0066324752 0.0098729191 0.0313655106 -0.0286704489 -0.0034784856 0.0328686035 0.0092918576 -0.0078679810 -0.0070834087 0.0097280709 0.0091016173 -0.0025369236 -0.0070297415 0.0029517440 -0.0016558809 -0.0518263053 0.0275040046 -0.0595141902 -0.0974336219 0.0584213382 -0.1668336484 0.0169535434 -0.0110958737 0.0274169195 -0.0211971784 0.0141789135 -0.0339530343 0.0046538139 -0.0042440236 0.0122675202 0.0064202129 -0.0030576506 0.0094428459 0.0171152960 -0.0071989760 0.0234666078 -0.0025079913 0.0020657595 -0.0044071389 -0.0852702340 0.0432315154 -0.1383131201 -0.1166368759 0.0637689266 -0.1882429192 -0.0559259506 0.0363975711 -0.0857660501 0.0126602662 -0.0075181149 0.0145606809 -0.0032892040 -0.0016064148 -0.0045343782 0.0040701979 -0.0086415320 0.0076734566 -0.0043328099 0.0021373048 -0.0091492311 0.0044138533 -0.0033591153 0.0075833167 0.0008314200 -0.0009347953 0.0077634528 0.0039811574 0.0018608389 0.0041471705 0.0016963814 0.0027760928 -0.0000599012 -0.0019354181 -0.0006229360 0.0035400812 -0.0101475067 0.0024861152 -0.0222571587 -0.0021952541 0.0047059082 -0.0099863671 -0.0183113855 0.0094791229 -0.0377102091 -0.0243336369 0.0109700696 -0.0500972638 -0.0169770073 0.0035520638 -0.0427956586 0.0008069086 -0.0017905490 0.0031645530 0.0031231553 -0.0081445797 0.0263100464 0.0008046445 0.0249400390 -0.0018803197 -0.0007402703 0.0003260195 -0.0033169977 0.0025215406 -0.0037313231 0.0044381578 -0.0025866146 0.0018369202 0.0021009401 0.0043983211 -0.0050436847 -0.0117058821 0.0000544442 0.0040922384 -0.0032689738 0.0073390971 -0.0051270853 0.0105590023 -0.0153529839 0.0084705062 0.0101712927 0.0005200660 0.0006600058 -0.0010509703 -0.0004020105 0.0010043364 0.0003549450 -0.0033758727 -0.0041241829 0.0015676364 0.0021856131 -0.0066675440 0.0028102617 -0.0208114571 0.0185203571 -0.0025039641 -0.0230525530 -0.0231178314 0.0419873520 -0.0028679146 0.0127160999 -0.0238076649 -0.0194477912 -0.0111326800 0.0228626225 0.0218018868 0.0527891520 0.0463420292 0.0134003934 -0.0391006265 -0.0378491598 0.0255200605 0.0276963475 0.0280338623 -0.0007169386 0.0019305291 0.0016181220 -0.0008080560 -0.0012948250 -0.0003578594 -0.0000002849 0.0012036565 -0.0001629919 -0.0099766229 -0.0017025370 0.0045455080 -0.0085468414 -0.0027055598 -0.0139282189 -0.0129453282 -0.0061917617 -0.0105373409 0.0139315554 0.0030048220 -0.0052435293 0.0054182809 0.0062811362 0.0087055877 0.0061469906 0.0073353416 0.0051447232 -0.0013978233 -0.0029504562 -0.0119518144 -0.0321745541 -0.0041063294 0.0083132143 0.0040501064 -0.0124537952 0.0056253171 -0.0152811249 -0.0126697437 0.0202862570 0.0121862144 -0.0113563237 0.0071664288 0.0164263694 -0.0078220481 -0.0160269780 0.0128039749 0.0059266718 -0.0194273421 -0.0097595137 -0.0267049455 -0.0014675712 -0.0046458761 0.0058090532 0.0235591280 -0.0000627192 -0.0059734777 0.0216389888 -0.0037688326 -0.0031898183 -0.0169790185 0.0124559800 0.0583367600 -0.0064815901 -0.0165897175 0.0161523678 -0.0154604444 -0.0048845703 0.0690288025 0.0029275991 -0.0188004137 -0.0028976151 0.0025447860 -0.0055687647 0.0001875071 -0.0084446253 -0.0035267776 0.0080130420 0.0040713075 0.0156450526 -0.0061510508 -0.0038243801 0.0028145060 0.0013878838 0.0162536354 0.0065296585 0.0249383814 0.0139913048 0.0151380695 0.0135316328 0.0809409193 -0.0015359037 0.0079366147 -0.0570486251 -0.0212616357 -0.0251835246 -0.0614991933 0.0850825122 0.1755541981 0.3641959696 0.0758795785 0.1604056685 0.4663471580 0.0059789241 -0.0512654589 -0.0444305113 0.0024730601 -0.0153653383 -0.0260615544 0.0773103618 0.0344723552 0.1928968976 0.1063685195 0.1842190152 0.4225951264 -0.0203876094 0.0009179816 0.0141410544 -0.0031106939 0.0130476813 -0.0019144430 0.0097859158 -0.0183727449 -0.0079200592 0.0037888415 -0.0038419762 -0.0045998870 -0.0473495164 0.0057210679 0.0225819851 -0.1001834678 0.0548676487 0.0473542619 0.0093692766 0.0061976297 -0.0118698486 0.0160242736 -0.0066512697 -0.0040447894 -0.0762206030 0.0466315030 0.0317862711 -0.0908341548 0.0390737471 0.0626441602 -0.0003182044 -0.0001200339 0.0000206727 -0.0022704273 -0.0020447442 0.0015401137 0.0003608623 0.0008734391 0.0024077557 0.0021993476 0.0024458642 0.0014395160 0.0005713206 -0.0001372603 0.0005808940 -0.0052961122 -0.0014833107 0.0041488884 0.0031508267 -0.0002525301 0.0022699424 0.0029475403 0.0004154051 -0.0007571984 0.0038205810 0.0005644063 -0.0060457347 -0.0174260390 -0.0136143836 -0.0894793233 -0.0004116866 0.0184006541 -0.0029984374 -0.0043283989 -0.0230804373 -0.0018372194 0.0002492292 -0.0103649527 0.0008031267 0.0155432589 -0.0173315287 -0.0059263630 -0.0083187893 -0.0140105059 0.0146504925 0.0041464517 0.0196414626 -0.0164793770 -0.0130332850 0.0125270885 -0.0015711921 -0.0084529636 0.0275969933 -0.0098149659 0.0004991965 0.0023361258 0.0204787867 -0.0080246397 -0.0051451963 0.0016485160 0.0018914189 -0.0016813738 -0.0023634545 0.0025357312 0.0025894196 0.0004650546 -0.0052837824 0.0033535475 -0.0000002604 0.0869999334 -0.0476949577 0.0959928937 0.2080120656 -0.1210021932 0.3530972258 -0.0353005964 0.0237871381 -0.0556522900 0.0419581067 -0.0276312499 0.0655629779 -0.0125771058 0.0102212523 -0.0246522451 -0.0138868748 0.0063147822 -0.0206549270 -0.0341808054 0.0158941919 -0.0501592101 0.0079937468 -0.0042039429 0.0140332643 0.1716753456 -0.0864155413 0.2843604688 0.2450640187 -0.1344877017 0.3977812007 0.1288608971 -0.0789759148 0.1945942050 -0.0231058019 0.0120992072 -0.0273183682 0.0069272144 0.0030935109 0.0080255876 -0.0040570783 0.0133363224 -0.0083738592 0.0073339669 -0.0036183952 0.0151701335 -0.0075195409 0.0058172895 -0.0125618769 -0.0014513390 0.0016350487 -0.0129635260 -0.0066976844 -0.0033924558 -0.0067053720 -0.0028483215 -0.0048477093 0.0002734885 0.0028863172 0.0011904594 -0.0060107197 0.0173375223 -0.0042211370 0.0386032406 0.0032354494 -0.0083768559 0.0161344153 0.0309219693 -0.0163638454 0.0618137117 0.0407877999 -0.0186199742 0.0847964024 0.0287614036 -0.0055849621 0.0720307102 0.0002184075 0.0013374666 -0.0087038258 -0.0035124208 0.0142850516 -0.0282724013 0.0048114503 0.0031529965 0.0016070421 0.0011767579 -0.0003982004 0.0067749340 -0.0049702831 0.0070637305 -0.0092377786 0.0067761849 -0.0071993536 -0.0063364429 -0.0163503597 0.0232535395 0.0267047997 0.0005344320 -0.0289227806 0.0155880411 -0.0220142215 0.0191014527 -0.0174231937 0.0487161371 -0.0229606145 -0.0341170976 -0.0006173195 -0.0008446948 0.0019935093 0.0010037642 -0.0024999050 -0.0010610566 0.0404076030 0.0061801882 -0.0010856164 -0.0198391122 0.0507842559 -0.0174389511 0.1071999172 -0.0872891245 0.0226121843 0.0618776044 0.0648036546 -0.1384533200 0.0109509175 -0.0537217526 0.0663722077 0.0533414074 -0.0042060988 -0.0187217982 -0.0697337028 -0.1599337613 -0.1333577525 -0.0421252289 0.1261057642 0.1271337765 -0.0805307856 -0.1010264573 -0.0981125204 0.0003804627 -0.0035597387 -0.0030258458 0.0019045574 0.0018605052 0.0006035509 -0.0005432778 -0.0026630192 0.0007953207 0.0011336968 0.0104882308 -0.0078954010 -0.0029382291 -0.0064675345 -0.0002722613 -0.0012203959 -0.0015056608 -0.0071695076 0.0040278302 -0.0095299170 0.0049756016 -0.0005236772 0.0075341692 0.0043346488 -0.0017529752 0.0017610848 0.0093317138 0.0034696933 -0.0066558069 0.0019672941 -0.0025961704 0.0145054925 -0.0136857164 0.0033837800 0.0049527991 -0.0042618781 -0.0066967249 0.0217427767 -0.0117462630 0.0021730488 -0.0003799599 0.0067139775 0.0073094321 -0.0035642573 -0.0072218127 0.0074983023 -0.0020534109 -0.0063185490 -0.0064023767 -0.0067145621 -0.0015065923 -0.0033121755 0.0006607667 0.0091953201 -0.0029897413 -0.0025656326 0.0081782520 -0.0173669276 0.0289008838 -0.0174606061 0.0014182783 0.0355315905 -0.0037033848 -0.0054326551 0.0115010947 -0.0076772373 0.0029719991 0.0214412726 0.0018598507 -0.0197402723 0.0129705425 -0.0053542205 -0.0034417733 -0.0021659609 -0.0008309938 -0.0014898085 0.0002310495 0.0042253828 0.0044267412 -0.0038088022 -0.0009934517 0.0025971831 -0.0015199132 0.0055268301 0.0058594857 0.0221044257 0.0301995255 0.0022056386 -0.0023713360 0.0087242359 -0.0014074892 -0.0005773005 -0.0345216992 -0.0056996976 -0.0071546874 -0.0125733057 0.0325195103 0.0565421486 0.1091794575 0.0370769167 0.0718436255 0.2163928243 0.0021996584 -0.0138396388 -0.0090522371 -0.0027350329 -0.0122695036 -0.0258204141 0.0402195565 0.0380728115 0.1328937944 0.0406589370 0.0728214640 0.1774002738 -0.0213206313 0.0039674181 0.0151364375 0.0169196982 -0.0037027920 -0.0139947213 0.0032628020 -0.0157404118 -0.0047277804 -0.0111567375 0.0030937175 0.0045894346 0.0267382462 -0.0305005009 -0.0248494015 -0.0194405964 0.0144270903 -0.0025926726 -0.0045967381 0.0105121625 -0.0019299278 0.0131278942 -0.0043823434 -0.0047818707 -0.0444573353 0.0290183294 0.0176100146 -0.0031962995 -0.0019953448 0.0041998890 0.0005706769 0.0001302578 -0.0001560180 0.0043250376 0.0033513567 -0.0028130737 -0.0012701548 -0.0027502104 -0.0049733562 -0.0039509120 -0.0049671303 -0.0030724281 -0.0016997910 0.0007138558 -0.0013548510 0.0089841943 0.0053512927 -0.0070172131 -0.0022161935 -0.0023944341 -0.0044384515 -0.0105399488 -0.0010118277 0.0032387560 0.0171456868 0.0209808026 0.0332746232 0.0328860218 0.0443883768 0.0324306094 0.0126214319 0.0245096027 -0.0198571354 -0.0004569487 -0.0056558855 0.0195061847 0.0013217649 -0.0210490638 -0.0502211164 0.0101334290 -0.0043437804 0.0009960018 0.0051976869 -0.0061600478 0.0094486171 0.0044634917 0.0142114435 -0.0091417891 -0.0063175563 0.0079786731 -0.0004782958 0.0284475777 0.0003300018 -0.0234817413 0.0036634369 -0.0075979459 0.0058426417 -0.0113100071 0.0184854780 0.0333274397 -0.0003774021 -0.0087113323 -0.0079278469 -0.0003178093 0.0026615710 0.0024297875 -0.0070030343 0.0039827855 -0.0053202109 0.0951861908 -0.0496176523 0.1051130529 0.1327712556 -0.0763657307 0.2253868260 -0.0243348357 0.0167043207 -0.0380407990 0.0318510663 -0.0215102108 0.0505610159 -0.0062842586 0.0063931968 -0.0138296785 -0.0071258777 0.0025880453 -0.0106684672 -0.0244037610 0.0093101979 -0.0325677096 0.0006570945 -0.0008571723 0.0016104696 0.1166048370 -0.0596020540 0.1914397814 0.1574701825 -0.0867060255 0.2509137141 0.0704304129 -0.0468652067 0.1094256697 -0.0175781640 0.0122644737 -0.0249340999 0.0029394620 0.0006197426 0.0051679357 -0.0200079942 0.0227879614 -0.0376486541 0.0075930191 -0.0033977333 0.0169509064 -0.0068948948 0.0039100259 -0.0145659400 -0.0033500972 0.0019393692 -0.0133014709 -0.0052239528 -0.0019171865 -0.0059947459 -0.0017331310 -0.0029767708 -0.0000096409 0.0007483009 0.0010863645 -0.0063979407 0.0186809714 -0.0053530962 0.0435758615 0.0026939776 -0.0045412079 0.0118245549 0.0292931560 -0.0121354987 0.0670694549 0.0432611167 -0.0173131043 0.0955655810 0.0336703996 -0.0087201828 0.0795393358 0.0028576088 0.0013151422 -0.0047917241 -0.0017093707 0.0069128475 -0.0316382350 0.0048457681 -0.0084453741 0.0026523746 0.0023263217 -0.0009528455 0.0089666614 -0.0012880427 0.0119271547 -0.0032381154 -0.0058093894 0.0108966890 0.0125710144 0.0325845651 -0.0481824724 -0.0407597624 -0.0032934784 0.0625313518 -0.0285578241 0.0298676971 -0.0369063414 0.0189148781 -0.0905255257 0.0372524842 0.0652254893 0.0009451133 -0.0029246146 0.0005207634 -0.0003337012 -0.0004053517 0.0003859252 -0.0961845588 0.0029113216 -0.0051961880 0.0435638385 -0.1074903151 0.0309538993 -0.2174375869 0.1737671413 -0.0472017424 -0.0861219474 -0.0945765038 0.2416742095 -0.0183883132 0.0758209651 -0.0924160727 -0.0691340053 0.0445428460 -0.0210107064 0.1303056070 0.2870603682 0.2290544287 0.0770740392 -0.2359329413 -0.2455750948 0.1483488516 0.2034119308 0.1929211430 0.0057241215 -0.0045949119 -0.0028913398 -0.0013346418 0.0001161989 -0.0022450454 0.0030897641 -0.0003224117 -0.0034590764 -0.0241424043 -0.0298942331 0.0289717432 -0.0039368463 0.0083596610 -0.0243202972 -0.0139391074 -0.0080777028 -0.0041430314 0.0211721447 0.0346132179 -0.0288066076 0.0060069631 0.0011412541 0.0094202652 0.0132938246 0.0167750588 -0.0111061227 -0.0037557146 0.0018710389 -0.0176451155 -0.0556639933 -0.0653023127 0.0666089797 -0.0066732529 -0.0559056648 0.0328896229 -0.0359888783 -0.0898426704 0.0845468589 0.0106739125 -0.0202921709 0.0067928319 -0.0016248450 0.0026790554 -0.0004790991 0.0007264167 -0.0030112196 0.0010004800 -0.0023331194 0.0052376513 -0.0014098252 0.0001886542 -0.0015412778 -0.0001424344 -0.0020998889 0.0023231226 -0.0008593485 -0.0068783259 0.0136036886 -0.0039057446 0.0014650247 -0.0055226639 0.0012765908 0.0011160554 -0.0013038802 0.0010342261 0.0070249500 -0.0110874082 0.0024037452 -0.0069370062 0.0104382115 -0.0037477812 -0.0024888981 0.0136447628 -0.0162134425 -0.0005177426 0.0203504888 -0.0052900116 -0.0010970415 0.0003741335 -0.0005011749 0.0002720740 0.0001191235 -0.0007396888 -0.0050822817 -0.0189185096 -0.0432038441 0.0044027918 0.0046211314 0.0404312265 0.0043616197 0.0093664601 0.0223324277 -0.0011863520 -0.0012253958 -0.0172047153 -0.0007158956 0.0137036351 0.0325052902 -0.0112485981 -0.0295951881 -0.0837046380 -0.0001148803 -0.0154139917 -0.0096006830 0.0018613792 0.0148886716 0.0279010866 -0.0137251416 -0.0531273490 -0.1083868038 -0.0061488778 -0.0049621234 -0.0482126100 0.0028487033 -0.0079104294 0.0001593912 -0.0069405659 0.0106911223 0.0014912168 -0.0069672853 -0.0128369214 0.0005005133 0.0013334456 -0.0048581843 -0.0050916859 -0.0301754697 -0.0053572032 0.0094531054 -0.0145059402 0.0107603217 -0.0088786685 0.0030011233 0.0073155548 -0.0087777711 -0.0009190602 0.0019910030 0.0030274590 0.0018505408 0.0035281191 -0.0171958411 -0.0127529650 0.0011091746 0.0087951372 -0.0015218460 -0.0030460479 0.0017271605 0.0019708565 0.0085821809 -0.0074225022 -0.0003012171 0.0015420917 -0.0079386148 -0.0190929458 -0.0155017598 -0.0039517027 0.0019363607 0.0010238139 0.0007452431 0.0160785930 -0.0091619502 -0.0124229524 -0.0053350803 -0.0033432433 -0.0131482034 -0.0075082999 0.0042302374 -0.0013615010 -0.0332928789 -0.0459448205 -0.0796148586 -0.0739691341 -0.0990250893 -0.1159456316 -0.0251901585 -0.0403048583 0.0392517937 0.0006635898 -0.0031165351 -0.0440675041 0.0028389633 0.0417079753 0.1131187662 -0.0017191280 -0.0007854613 -0.0071219287 -0.0144633205 0.0091616900 -0.0074465542 -0.0070983968 -0.0138382773 0.0064287670 0.0006574445 -0.0028821690 0.0021677908 -0.0646270174 0.0194355496 0.0394328780 -0.0049457543 0.0148765489 0.0038045756 0.0205779954 -0.0407791396 -0.0706722803 0.0014748916 0.0171727589 0.0131158185 -0.0012550466 -0.0053126274 -0.0043911556 0.0083384656 -0.0042216768 0.0112309512 0.0305964455 -0.0150268589 0.0321822965 0.0204264872 -0.0155848481 0.0365661111 -0.0034047047 0.0012376529 -0.0069270411 0.0052358052 -0.0042244129 0.0096270265 -0.0000653768 0.0003394408 -0.0043814990 -0.0008588204 0.0003673993 -0.0012775822 -0.0054293222 0.0006907288 -0.0043872284 0.0007727121 -0.0004969962 0.0002342536 0.0217771114 -0.0107397256 0.0322712881 0.0245439871 -0.0134822475 0.0388494021 0.0076482301 -0.0084834417 0.0147474749 -0.0038405258 0.0040955823 -0.0054558312 -0.0014539006 0.0006172022 0.0000494814 -0.0139035237 0.0125673987 -0.0223857411 0.0050853348 -0.0018767567 0.0120626480 -0.0035705510 0.0019181037 -0.0079871655 -0.0022928419 0.0005845319 -0.0068558691 -0.0036842065 -0.0000074893 -0.0055373502 -0.0004056417 -0.0009864106 0.0007199047 0.0011628918 -0.0001250429 -0.0012586532 0.0044203700 -0.0016409980 0.0105575065 0.0016563055 0.0011874807 0.0061414311 0.0194324184 -0.0082908139 0.0338306924 0.0193805033 -0.0076522474 0.0424892964 0.0134925828 -0.0043611856 0.0345003889 -0.0018184634 0.0029504238 -0.0011907838 -0.0001543997 0.0006825155 0.0053359373 -0.0020011219 0.0064808268 -0.0017270182 0.0006370016 0.0000334563 0.0020491560 0.0014711179 0.0041351226 0.0020815104 -0.0058640747 0.0104444358 0.0100902078 0.0283871739 -0.0412319194 -0.0322832264 -0.0051516494 0.0549689906 -0.0224746859 0.0275847833 -0.0296612227 0.0111324150 -0.0756019335 0.0295648266 0.0548484992 -0.0000408757 -0.0014012434 -0.0003389953 -0.0007072992 0.0007041012 0.0008022862 -0.0891443936 0.0125169022 -0.0098839402 0.0363185054 -0.0886250871 0.0223674556 -0.1766844130 0.1401903743 -0.0406381978 -0.0748697036 -0.0805317912 0.2061815416 -0.0180476183 0.0807598890 -0.0881032478 -0.0636262798 0.0443846308 -0.0250138768 0.1097232533 0.2377364943 0.1868497585 0.0642111335 -0.1977059325 -0.2084453162 0.1239290652 0.1726855928 0.1633577882 0.0037437039 -0.0015179999 -0.0004896092 -0.0014669919 0.0002225240 -0.0009333628 0.0023227579 0.0006267783 -0.0025304542 0.0438892716 0.0601245361 -0.0564169671 0.0085033301 -0.0234588981 0.0451021867 0.0261162167 0.0082841487 0.0051969275 -0.0353489576 -0.0683992107 0.0540516755 -0.0148159848 0.0016978367 -0.0101979887 -0.0248913586 -0.0268148097 0.0294438514 0.0247079226 0.0046744207 0.0204244295 0.1086038635 0.1421032034 -0.1452315251 0.0152989918 0.1255449729 -0.0746829392 0.0577279836 0.1888465887 -0.1693289279 -0.0099934287 0.0563961426 -0.0191241215 0.0043924457 -0.0027579227 -0.0010890015 0.0028915521 0.0020999528 -0.0017192840 0.0009493448 -0.0072411026 0.0012970303 -0.0016054854 -0.0001995905 0.0022737183 0.0008578912 -0.0047659549 0.0026133582 -0.0013001702 0.0030983809 -0.0027760879 -0.0021840012 0.0207842584 -0.0027438926 -0.0036699776 0.0097169487 -0.0059514667 -0.0105662536 0.0235352912 -0.0047882889 -0.0069113660 0.0060776031 -0.0026878978 0.0015615957 -0.0308544904 0.0338076566 -0.0002228697 -0.0428949348 0.0149720501 0.0018714385 -0.0029924552 0.0007999227 0.0011535838 -0.0024834492 0.0023427714 0.0149451889 0.0527107170 0.1153268422 -0.0107102362 -0.0161228578 -0.0900286176 -0.0097832933 -0.0235426531 -0.0654673660 0.0031995822 0.0019401818 0.0348024220 0.0113730604 -0.0126058820 -0.0364448226 0.0444909733 0.0965025770 0.2798149011 -0.0002433809 0.0283770315 0.0197990042 -0.0093734883 -0.0368070962 -0.0764476840 0.0525869364 0.1373684497 0.3087129617 0.0262557651 0.0430567011 0.1828807952 -0.0255680894 0.0204537995 0.0133645631 0.0319500424 -0.0282373083 -0.0175356653 0.0154143230 0.0108575462 -0.0049919707 -0.0151183122 0.0129916306 0.0153318919 0.0940987660 -0.0227829363 -0.0480438178 0.0205337062 -0.0131740397 0.0082870782 -0.0117146478 -0.0047254397 0.0171333351 0.0139547994 -0.0075770479 -0.0106929293 -0.0424009447 0.0189109816 0.0515493968 0.0320200292 -0.0072645866 -0.0198372220 -0.0017912902 -0.0024215405 0.0010100493 -0.0018504336 0.0025798029 -0.0028512929 -0.0005159397 0.0010525857 -0.0025483939 -0.0098553049 -0.0074204140 -0.0010209480 0.0024724038 0.0004365972 0.0006307574 0.0052090711 -0.0070740977 -0.0037241931 0.0001537831 -0.0031038021 -0.0073934020 0.0001744023 0.0019180133 -0.0008728259 -0.0184928696 -0.0537136220 -0.0585263437 0.0286963634 -0.1404258333 -0.0889068120 0.0047515778 -0.0849644696 0.0422271250 0.0465652592 0.0446477679 -0.0688161977 0.0549076813 0.0441936698 0.0366221346 -0.0023011025 0.0823082104 0.0252359042 0.0254051644 0.0984097460 -0.0361161971 -0.0161590947 -0.0638201544 0.0524467644 0.0521170928 -0.0174258388 0.0068953784 -0.0769836007 -0.0304999898 0.0875580679 0.0134380111 -0.0311015934 -0.0589895044 0.0619277500 0.0950533732 0.0208068832 -0.0265725254 -0.0199538093 -0.0106847428 -0.0242740842 -0.0169538669 0.0148076113 0.0052006043 0.0029542962 -0.0178850275 0.0073089907 -0.0025044500 0.0150839418 -0.0124847777 0.0104894330 -0.0210644456 0.0006461434 0.0009495648 0.0030934045 0.0001867185 -0.0000891192 0.0005789358 0.0020792031 -0.0001415812 0.0035755870 0.0009361224 -0.0014961337 0.0014169201 0.0015088705 -0.0015028879 0.0020629798 -0.0038755749 0.0007834438 -0.0053976034 -0.0069253541 0.0014396765 -0.0130835019 -0.0108047754 0.0052890011 -0.0222099952 -0.0125836919 0.0063860872 -0.0192867898 -0.0004856259 0.0015765693 -0.0017833189 0.0010997154 -0.0013111676 0.0014330723 0.0016900182 -0.0014636337 -0.0014321134 -0.0026593551 0.0007729584 -0.0063148992 0.0013685220 -0.0010177376 0.0025841971 0.0008882544 0.0001136134 0.0020535006 0.0022695923 -0.0002821993 0.0037591839 -0.0000672326 0.0003190959 -0.0009206511 -0.0011390203 0.0004334979 -0.0012850081 0.0030512757 -0.0006551066 0.0068650520 -0.0005164088 -0.0010427167 -0.0022381851 -0.0095214217 0.0048545823 -0.0090594325 -0.0032584852 0.0017141883 -0.0064596353 -0.0005953739 0.0004735448 -0.0046887730 0.0025104792 -0.0015941948 0.0034318981 -0.0037289109 0.0053500010 -0.0579609107 -0.0113853273 -0.0345578827 -0.0017771931 0.0009276662 -0.0011729084 0.0004767477 -0.0010127210 0.0002686331 -0.0010646021 -0.0006219458 -0.0002533199 -0.0005302744 -0.0010766361 0.0002082415 0.0034354664 0.0021826436 0.0016734132 -0.0030564415 -0.0012254546 -0.0017071498 -0.0019420958 0.0027202219 -0.0007270966 -0.0021316548 0.0004166060 -0.0003292386 0.0001108768 0.0000929005 0.0003988099 0.0002348059 0.0005040429 -0.0068027222 0.0037053500 0.0037448871 -0.0093912574 0.0055895422 -0.0128535011 0.0077590740 -0.0051958288 0.0014322323 0.0005334560 -0.0003052475 0.0012556412 -0.0027057231 0.0122404261 0.0052095136 0.0072450251 -0.0111122542 -0.0046794956 -0.0085218671 -0.0051556266 -0.0020032302 0.0064690302 0.0089075935 -0.0046105651 -0.0073844482 -0.0067129755 -0.0002080260 0.0001051440 -0.0001492430 0.0000234348 0.0000180932 -0.0000571921 -0.0001672766 0.0002962919 0.0004235184 -0.0528263079 -0.0872762890 0.0812617392 0.0223013194 0.0378043805 -0.0285417716 0.0050315816 -0.0154907235 0.0123725234 0.0329017983 0.0920954888 -0.0798662274 -0.0135857806 -0.0031177252 0.0189505430 0.0138249449 0.0453741395 -0.0254800944 0.0230583725 0.0211683567 -0.0093444228 -0.0590876021 -0.2089168194 0.1723734822 -0.0223223636 -0.1408499580 0.0900039745 -0.1035082036 -0.1884836449 0.1702450499 0.0130135731 0.0398808001 -0.0221515875 -0.0344410887 0.0056840011 0.0420310041 -0.0371025792 -0.0104477598 0.0456232916 0.0335852253 0.0383251439 0.0097490271 0.0096787545 -0.0139013588 -0.0549164179 0.0063565968 0.0015436840 -0.0469764113 0.0054644480 0.0042613641 0.0417994378 -0.0641505157 -0.0808344583 -0.0033827123 0.0278515975 -0.0081539905 0.0189322391 -0.0329657360 -0.0857687129 -0.0281788752 0.0359420625 0.0177410682 -0.0116075214 0.0002549863 0.0406813119 -0.0300277562 0.0083510699 0.0463508054 -0.0193695592 -0.0312027798 0.0063579805 0.0150248416 -0.0039405453 -0.0115998300 -0.0322728247 0.0160917291 -0.0087822630 0.1263141358 -0.0074478706 0.0134829465 -0.0370465963 -0.0242602506 -0.0969633893 -0.0425318132 0.0279175618 0.0009854825 -0.0126921964 -0.0578894811 -0.0087811990 0.1783105655 0.0905883426 0.1818974152 0.4132564400 -0.0515381886 0.0658231748 -0.0190990451 -0.0612742386 -0.0009077131 -0.0747574972 0.0181658102 0.1868295715 0.2937002638 -0.0461417761 0.0697290482 0.3727481161 0.0182858803 0.0131838959 -0.0183710802 0.0072712479 -0.0291482014 0.0047264570 -0.0026742902 0.0275087977 0.0013033537 -0.0077773345 0.0022358668 0.0019011431 0.0605064016 0.0066906325 -0.0225892323 0.0805051007 -0.0558905673 -0.0283523847 -0.0083243918 -0.0189976522 0.0226915313 -0.0130966866 0.0052621788 -0.0013407309 0.0632091917 -0.0441672184 0.0037548224 0.0839386033 -0.0138786428 -0.0566721578 0.0014861811 0.0011472877 -0.0001963409 0.0011237978 0.0016145418 -0.0004204901 0.0023624088 0.0026549643 -0.0001016137 0.0006049321 0.0010069182 -0.0001598958 -0.0005025902 -0.0012076182 0.0004705056 0.0031841796 -0.0001457846 -0.0018084903 -0.0076689184 0.0056835973 0.0024320341 0.0018738805 0.0005954739 -0.0025326518 0.0053677787 -0.0017794793 0.0170718546 0.0096899494 -0.0197780115 -0.0010477954 0.0041287040 -0.0165773319 0.0046982217 0.0187097536 -0.0048528472 -0.0052291239 0.0135684176 -0.0157908136 -0.0159731790 0.0236981009 0.0083583142 -0.0036476582 0.0142254696 0.0102929930 0.0094491731 0.0010403399 0.0207583075 -0.0088115085 -0.0107789383 0.0190910387 0.0071639061 -0.0120086868 0.0271274137 -0.0046715353 0.0009968598 -0.0116444554 0.0053780790 0.0027414271 0.0246811229 0.0170185471 -0.0053571536 -0.0052320632 -0.0052445055 -0.0011951975 -0.0020798711 0.0032373380 -0.0035690869 0.0029203883 -0.0070029189 -0.0524338663 0.0350891645 -0.0614428599 -0.0261322476 0.0136487597 -0.0374510465 0.0017245052 0.0005064459 0.0048289080 -0.0025359528 -0.0011732535 -0.0016050576 0.0119832514 -0.0022785224 -0.0017710579 -0.0002603724 -0.0080018063 0.0030801277 -0.0045155153 -0.0083313330 0.0047882370 0.0009982170 0.0036578884 -0.0104253031 -0.0032500154 -0.0031622324 -0.0319117360 -0.0195205218 0.0034534510 -0.0496084535 -0.0262623624 0.0024340349 -0.0275803828 0.0044952052 0.0044978186 0.0171150905 -0.0183315212 0.0145054044 -0.0156745889 -0.0324588871 0.0268975185 -0.0209279380 0.0368996700 -0.0146036700 0.0823554083 -0.0237363555 0.0136697532 -0.0468068030 -0.0093291399 0.0061978248 -0.0413313975 -0.0218889307 -0.0037433532 -0.0338929463 -0.0026501987 -0.0112663736 0.0085054033 0.0091864497 0.0004405246 -0.0072096208 0.0193764588 -0.0023486601 0.0386571539 -0.0013358676 -0.0073426857 0.0113181371 0.0907976617 -0.0414145198 0.1917097288 0.1130543979 -0.0502557206 0.2414257837 0.0787780942 -0.0191468110 0.1934672317 0.0047703090 0.0019978597 0.0021562892 0.0039945023 0.0029810601 0.0002880520 0.0282538811 -0.0601601730 0.0170579971 -0.0011685649 0.0006429645 -0.0022124954 -0.0011276279 -0.0021712161 -0.0051491711 0.0069608460 -0.0109599694 0.0137848632 -0.0148648241 0.0384186045 -0.0628659650 -0.0046732189 -0.0993166990 -0.0024942997 0.0421065959 0.0176290993 0.1066006651 -0.0154696247 0.0402697556 -0.0185585366 -0.0020368056 0.0008660304 0.0009007247 -0.0007513241 0.0005474338 0.0011822849 0.2604311130 -0.1236184083 0.0688828760 -0.1382934887 0.2519379784 -0.0188886692 0.2300922279 -0.1201650758 0.0913832450 -0.1379968038 -0.1156981081 0.0493546004 -0.0101614750 0.0293285456 -0.2430968909 -0.1641643434 -0.2646547475 0.3964366103 0.0080962070 0.1117898047 0.1756764891 0.0161594138 -0.0290164485 0.0374134337 0.0291682821 -0.1245957248 -0.0799943432 0.0008779636 0.0010313330 0.0013473648 -0.0011013845 0.0018378286 0.0010828484 -0.0017039004 0.0024806098 0.0019660201 0.0046248994 0.0168396795 -0.0137406563 -0.0083191860 -0.0105654130 -0.0051022853 -0.0082461207 -0.0022955939 -0.0121302848 0.0038093859 -0.0192577669 0.0135864531 0.0010999151 0.0116940095 0.0058404167 -0.0006503196 0.0020926421 0.0107415920 -0.0071293334 -0.0212514816 0.0065334577 -0.0124046031 0.0317575515 -0.0242778378 0.0081826283 0.0219120117 -0.0160127283 -0.0057539996 0.0296074149 -0.0140567781 -0.0021917478 -0.0170436116 0.0205316987 -0.0175845857 0.0193540281 0.0014084435 -0.0014349611 -0.0160400769 0.0106620397 -0.0182147449 0.0635601309 -0.0130784048 0.0059095634 -0.0120994712 -0.0120610431 -0.0084346404 0.0206346836 -0.0162978904 -0.0277332174 0.0483359739 -0.0078128173 0.0300603990 -0.1106587904 0.0228750479 0.0266578746 -0.0662436080 0.0389049807 0.0464355192 -0.1322730921 0.0242078750 -0.0096208475 0.0371834204 -0.0131478105 -0.0046805039 -0.0079671449 0.0006178355 -0.0032270288 -0.0038065363 0.0080151190 -0.0130677957 0.0187210277 -0.0082783379 -0.0043705961 0.0173722740 -0.0162276577 -0.0013083297 -0.0100713985 -0.0068057728 0.0047712181 0.0149720128 0.0098168731 -0.0061945945 -0.0107219398 0.0072388694 -0.0035014192 -0.0051504626 -0.0061269647 -0.0090842638 0.0020246169 0.0400301058 -0.0050414751 0.0089442774 0.0088378766 -0.0105900827 0.0170973822 -0.0100997508 -0.0042076549 0.0039213753 0.0058129044 -0.0307726836 0.0123461000 -0.0264124329 -0.0136314297 -0.0083739979 0.0153959292 -0.0324540390 0.0067550005 0.0287738627 0.0319206764 -0.0177527621 -0.0213603671 -0.0017304535 -0.0250451955 -0.0023376390 -0.0195296857 0.0095925221 0.0100176671 0.0638386556 -0.0660157850 -0.0593327084 0.0102709766 0.0033693128 -0.0236595671 -0.0105415712 0.0099167081 -0.0023891607 0.0135596404 -0.0027207791 -0.0168170084 -0.0658056113 0.0419069063 0.0366010467 0.0064327761 -0.0070484468 -0.0144233048 0.0014835377 0.0019988884 -0.0009181983 -0.0010593411 -0.0031461973 0.0032744130 0.0005624207 -0.0010434990 0.0043170641 0.0083663411 0.0080308623 0.0023579127 -0.0023182764 0.0031618935 -0.0013694983 -0.0066113820 0.0046626757 0.0018009512 0.0131519429 -0.0046468426 0.0073369406 0.0009655034 0.0056542794 -0.0055653002 0.0110968620 0.0087016228 0.0241572832 0.0140410126 -0.0164568656 -0.0426294909 0.0091425521 -0.0011547132 -0.0042730837 0.0120931156 -0.0105575560 -0.0004987319 0.0030507749 -0.0226794575 -0.0254538087 0.0640387455 -0.0018723938 -0.0180821359 0.0281434912 0.0049776012 0.0266617857 0.0011350669 0.0654211285 -0.0409212606 -0.0475936779 0.0547249722 0.0145108675 0.0051661105 0.0517831757 -0.0652351970 0.0041674795 -0.0207039238 0.0361206424 -0.0101230926 0.0139240756 0.0184773333 -0.0051903412 -0.0011321558 -0.0074560446 0.0021481069 0.0007703007 0.0028374819 -0.0086332005 0.0061446864 -0.0093439942 0.0508554867 -0.0330669721 0.0659146987 -0.0135217671 0.0200949780 -0.0321293966 0.0009680906 0.0014307413 0.0048120773 0.0018188616 0.0036301969 -0.0033769307 -0.0064116679 0.0017869069 0.0099657770 0.0012857239 0.0041589037 0.0007921466 0.0125098145 0.0058602099 0.0035721987 -0.0074993333 0.0000505044 -0.0026526807 -0.0216116859 0.0135581934 -0.0130114490 -0.0267381362 0.0189176829 -0.0319665177 -0.0119693801 0.0264743508 -0.0314922519 -0.0039303293 -0.0041460288 -0.0147962391 0.0160141337 -0.0147069348 0.0149815298 0.0294308295 -0.0263363967 0.0201185652 -0.0350089666 0.0141060325 -0.0780487496 0.0224421967 -0.0135374862 0.0439218038 0.0085412927 -0.0055655235 0.0386883851 0.0216951975 0.0038559882 0.0331651884 0.0027962909 0.0112116548 -0.0082743578 -0.0096927955 -0.0005518151 0.0063299167 -0.0157976185 0.0012945374 -0.0327413904 0.0003665133 0.0090582349 -0.0140317625 -0.0850179763 0.0392390433 -0.1830511145 -0.1057689610 0.0468885921 -0.2235484140 -0.0733244402 0.0169815942 -0.1800576246 -0.0001693185 -0.0071190764 0.0016812465 -0.0054884464 -0.0102511197 -0.0284518751 0.0775571855 -0.1515029450 0.0452614013 0.0003309600 0.0000588228 0.0032583307 0.0010604959 0.0027108037 0.0047213634 -0.0036452617 0.0066399737 -0.0092571741 0.0093359317 -0.0244526552 0.0384673420 0.0028425285 0.0620789365 0.0030383991 -0.0279856325 -0.0108615948 -0.0672203344 0.0098546997 -0.0258215336 0.0134116011 0.0010727867 -0.0009114357 -0.0007509949 0.0005539717 -0.0011392706 -0.0014405904 -0.1669435639 0.0826227556 -0.0459464257 0.0881813107 -0.1588372683 0.0090521133 -0.1423873989 0.0717977247 -0.0574914512 0.0884447139 0.0745925930 -0.0352997616 0.0068161458 -0.0220131720 0.1580711012 0.1069755187 0.1672430799 -0.2513677794 -0.0046355614 -0.0719682950 -0.1151227184 -0.0106366814 0.0196065854 -0.0254046857 -0.0188271157 0.0850709417 0.0550688270 -0.0003844422 -0.0017581155 -0.0017412199 0.0010734090 -0.0009455640 -0.0009000554 0.0021133791 -0.0029658463 -0.0027917277 0.0040458550 0.0182381311 -0.0147976709 -0.0104786479 -0.0109307046 -0.0046514929 -0.0094975844 -0.0021103828 -0.0125742088 0.0058590602 -0.0184104327 0.0125526213 0.0023391276 0.0108833699 0.0057006785 -0.0014716478 0.0002886288 0.0105705357 -0.0049451836 -0.0110032409 -0.0031589318 -0.0142793086 0.0375125676 -0.0269459174 0.0100432184 0.0170495746 -0.0126478031 -0.0040997662 0.0302789240 -0.0155337255 0.0000782066 -0.0169356940 0.0165861304 -0.0363883068 0.0489539711 -0.0073825798 0.0065740686 -0.0362346353 0.0135334849 -0.0589487561 0.1579770270 -0.0384136123 0.0140610195 -0.0268103363 -0.0140911600 -0.0224562838 0.0541653147 -0.0280558863 -0.0677379973 0.1179289106 -0.0293333497 0.1034088301 -0.2808407209 0.0629051144 0.0631877932 -0.1785797323 0.0995889610 0.1365099309 -0.3224512359 0.0734482032 -0.0357641194 0.0987290970 -0.0298611326 -0.0057736411 -0.0085895174 -0.0022682813 -0.0043171408 -0.0013655387 0.0093591074 -0.0252919628 0.0491965680 -0.0277098953 -0.0117532524 0.0509563058 -0.0333093161 0.0012392058 -0.0013440264 0.0050625475 0.0012727838 0.0048402056 -0.0011723783 -0.0059875959 -0.0069356178 0.0025966605 -0.0047118989 -0.0018269408 0.0003880757 -0.0092543444 -0.0041550557 0.0102334116 -0.0067174370 0.0083608817 0.0085106324 -0.0047016982 0.0091253426 -0.0044462950 -0.0018004488 0.0006712134 -0.0007919713 -0.0156047271 0.0125391047 0.0038253019 -0.0035190515 -0.0004150357 0.0094307028 -0.0697908271 0.0078206748 0.0649824603 0.0640919534 -0.0345226428 -0.0446978415 -0.0046057169 -0.0613430168 -0.0042234058 -0.0382715553 0.0224745681 0.0209263636 0.1193466056 -0.1472261450 -0.1280469588 0.0086327154 0.0215027327 -0.0472685493 -0.0205513972 0.0211069888 -0.0065776576 0.0314076311 -0.0051696631 -0.0361451933 -0.1487196356 0.0952959330 0.0841354426 -0.0012040520 -0.0085236434 -0.0203902144 -0.0013422886 -0.0009248776 0.0013033107 0.0060569942 0.0055264742 -0.0041161301 -0.0024049714 -0.0017389986 -0.0038365572 -0.0054065578 -0.0069449154 -0.0024502849 0.0007512565 -0.0022563428 0.0007298827 0.0080202504 -0.0053024268 -0.0052647503 -0.0151731756 0.0075686582 -0.0051072810 0.0052998329 -0.0044815295 0.0025215283 0.0018485458 -0.0076005194 0.0092717869 0.0012374638 -0.0151556449 0.0213109145 -0.0001379922 -0.0193351699 0.0084622163 0.0177742848 -0.0050552976 -0.0056465520 0.0162239674 -0.0103838639 -0.0048629359 -0.0091592813 0.0125366639 0.0097946006 0.0009643088 0.0084309577 0.0014207865 0.0012525135 -0.0066202101 0.0093397769 0.0155988082 -0.0086559969 -0.0031980500 -0.0132507349 0.0077579606 0.0275276137 0.0061785273 -0.0086675073 -0.0141122650 0.0064240003 0.0244427745 0.0105810198 -0.0044104729 -0.0033874892 -0.0027750772 -0.0050973857 -0.0038228790 0.0027037027 -0.0013070470 0.0004151961 -0.0014831477 0.2192597143 -0.1326089593 0.2436695368 0.0528844149 -0.0168008363 0.0740487737 -0.0077769805 0.0057009857 -0.0102870017 0.0162480610 -0.0027670757 0.0166449991 -0.0228832750 0.0061586051 0.0092540375 0.0005562413 0.0139004800 -0.0042499277 0.0121153632 0.0181306550 -0.0118197649 -0.0076138721 -0.0024516149 0.0095499334 0.0097351379 0.0025373848 0.0714400298 0.0387014501 -0.0083931697 0.0960227751 0.0398872332 0.0100445857 0.0309381651 -0.0235454746 -0.0015533328 -0.0522701477 0.0361418360 -0.0334479506 0.0404303971 0.0385426481 -0.0329352061 0.0034050242 -0.0721350992 0.0290641278 -0.1608683753 0.0424512561 -0.0269241334 0.0831686070 0.0153720448 -0.0097021035 0.0710510498 0.0482927740 0.0056147058 0.0772381944 0.0041761580 0.0227532126 -0.0195064218 -0.0235428709 0.0001317321 0.0026804586 -0.0031358931 -0.0066668486 -0.0017305900 -0.0071163121 0.0144327936 -0.0467417031 -0.1668316295 0.0785642012 -0.3515758953 -0.1823796608 0.0820691643 -0.3771752446 -0.1237001081 0.0259974803 -0.3054435391 -0.0032986767 -0.0097273894 -0.0044607246 -0.0103694732 -0.0116948571 -0.0340966504 -0.0109915908 0.0149253895 -0.0059562133 0.0067731406 -0.0041020710 0.0264102736 -0.0074385762 0.0250988056 -0.0059712185 0.0088481977 -0.0129637099 0.0084298675 -0.0035413967 0.0221918796 -0.0420184806 -0.0097568277 -0.0655365888 -0.0030802735 0.0179351156 0.0073464403 0.0654575395 -0.0241391257 0.0272053508 -0.0049107864 -0.0003943926 -0.0064405949 0.0015708527 0.0008790991 -0.0046025625 -0.0036455613 0.1811052886 -0.0782180606 0.0446552274 -0.1068743783 0.1910562954 -0.0175331118 0.1607729856 -0.0789089537 0.0656748091 -0.0731193775 -0.0616259088 0.0373522473 -0.0070818870 -0.0006694837 -0.1317833222 -0.0884666937 -0.1504049243 0.2257745379 0.0251424420 0.1093193932 0.1374896129 0.0220707659 -0.0596453135 -0.0198223990 0.0418862412 -0.0520881415 -0.0245569654 0.0041782941 -0.0125109666 -0.0114880134 0.0026985431 0.0045774588 -0.0019031062 0.0082767617 -0.0088272862 -0.0109326459 0.0076638795 0.0181288807 -0.0159398457 -0.0060828303 -0.0087025580 -0.0019085720 -0.0050646388 0.0004669056 -0.0104755981 0.0007524806 -0.0201864534 0.0147907973 -0.0004552819 0.0100896135 0.0044758754 -0.0028784629 -0.0000064526 0.0099079156 -0.0096684356 -0.0240212744 0.0133232046 -0.0064500941 0.0282386560 -0.0226570522 0.0088311208 0.0247270822 -0.0159609139 -0.0011359284 0.0360918160 -0.0212077038 -0.0048748563 -0.0121528898 0.0172936113 -0.0010200038 -0.0043759152 0.0064398245 -0.0071187141 0.0033577873 0.0048361549 0.0130301482 -0.0161502398 0.0067545843 -0.0007498015 0.0012611719 -0.0062656029 0.0035167379 -0.0069049907 -0.0031674758 0.0115528796 -0.0192590651 0.0111959026 -0.0230408199 0.0218648671 -0.0088139960 -0.0044903160 0.0234033476 -0.0109938142 -0.0232196630 0.0304005127 -0.0141070812 0.0089870368 -0.0103817919 0.0016063495 -0.0033659726 -0.0095569979 0.0013691845 -0.0033227558 -0.0052967811 0.0079792810 -0.0011667616 -0.0056254720 0.0061216984 0.0011302228 -0.0088273454 -0.0002481394 -0.0025442975 -0.0106698721 -0.0136441362 0.0060807407 0.0171362264 0.0135954022 -0.0046682690 -0.0077209372 0.0074151991 -0.0037232892 -0.0066741259 -0.0076188048 -0.0034904848 0.0071366683 0.0455816337 -0.0046806775 0.0049356642 0.0056709526 -0.0102978468 0.0170169357 -0.0106675937 -0.0028967714 0.0037806314 0.0087574506 -0.0325339852 0.0078505273 -0.0394173664 -0.0136594404 -0.0112059988 0.0114893847 0.0038255747 0.0001631822 -0.0033101373 -0.0001219636 0.0019525122 0.0001750612 -0.0024057382 0.0009976595 -0.0002372293 -0.0013292699 -0.0032875279 -0.0021142106 -0.0036668061 0.0034649145 0.0045347820 0.0044355210 -0.0058119391 -0.0064137618 -0.0003262897 0.0023798482 -0.0015250764 -0.0026059643 0.0005784439 0.0023414401 0.0109310451 -0.0057605083 -0.0129774658 0.0088836029 -0.0049816745 -0.0051293370 -0.0038088170 -0.0050599712 0.0055716250 0.0171339200 0.0251527653 -0.0188705937 -0.0031264857 0.0016917335 -0.0180748637 -0.0378104026 -0.0353596678 -0.0105110699 0.0031256952 -0.0000049608 0.0005792973 0.0433266630 -0.0120116234 -0.0328198775 -0.0098021942 0.0003568702 -0.0111055768 -0.0283735530 0.0159922779 -0.0136268053 0.0240725769 -0.0352636690 0.0567177526 0.0285085370 -0.0621567861 0.1130719446 0.0100635954 -0.0874061565 0.0369051675 0.1074300837 -0.0585785282 -0.0347266938 0.0958781215 -0.0780996823 -0.0342590586 -0.0266422528 0.0734871262 0.0642756010 0.0206937823 0.0406045014 0.0354091880 0.0136572948 0.0074027834 0.0257066768 0.0791802699 -0.0279253643 -0.0240581740 -0.0737776932 0.0924964608 0.1297303602 0.0524150788 -0.0739858881 -0.0596583397 0.0229589722 0.1622241579 0.0888774954 -0.0368672566 -0.0292672179 -0.0234914142 -0.0290276467 -0.0117265095 0.0251843507 -0.0078871264 0.0141275272 -0.0368268876 -0.0735751902 0.0463586200 -0.0681766781 -0.0069723279 0.0180162520 -0.0108238207 -0.0036020621 0.0080707163 0.0058051105 0.0020828463 -0.0015482555 -0.0005977285 0.0054173806 0.0032430889 0.0022218488 -0.0006852296 -0.0107261036 0.0022942184 -0.0006501853 -0.0054136676 -0.0020571471 -0.0021467979 0.0031566732 -0.0095434309 0.0048999221 -0.0095187188 -0.0046791911 -0.0020130273 -0.0086189129 -0.0221551990 -0.0094044983 0.0042743874 -0.0128685475 0.0089022932 0.0006793783 0.0122850982 -0.0099625238 0.0074755749 -0.0132709631 -0.0104780978 0.0072427297 -0.0054244341 0.0202215272 -0.0078174409 0.0447263579 -0.0107297697 0.0061166047 -0.0221276061 -0.0053362395 0.0023203221 -0.0170553506 -0.0130551707 0.0004066114 -0.0233366133 0.0001554985 -0.0042943833 0.0054564855 0.0043517773 -0.0004010748 0.0020465485 -0.0056596243 0.0030688085 -0.0112127120 0.0052532312 0.0035566755 0.0177471433 0.0501356367 -0.0220702120 0.0905831992 0.0414114169 -0.0183342643 0.0909338437 0.0301157632 -0.0070867807 0.0743002132 0.0070175128 -0.0057033203 0.0062907827 -0.0061591400 0.0120084340 -0.1015152904 -0.0372696525 0.0409617870 -0.0195756597 -0.0003429184 -0.0014895801 -0.0082579136 0.0018264843 -0.0071985091 0.0005918855 -0.0078100473 0.0061963920 -0.0064003280 0.0069550037 -0.0174755096 0.0336675862 0.0027637369 0.0511978517 0.0013105624 -0.0182213265 -0.0109551790 -0.0556867199 0.0112695164 -0.0218091351 0.0077396004 0.0023300406 0.0020532318 -0.0006176182 -0.0000951022 0.0026231983 0.0018279533 -0.1354466737 0.0699921402 -0.0384910710 0.0739065964 -0.1328441724 0.0062593981 -0.1127964467 0.0476512502 -0.0551969089 0.0598582574 0.0490794031 -0.0187116557 0.0040476864 0.0017741448 0.1237859796 0.0850814949 0.1459131613 -0.2137889341 -0.0087964379 -0.0676940901 -0.0983824605 -0.0109790677 0.0236122339 -0.0110694920 -0.0204509516 0.0566336183 0.0345209963 -0.0024004478 0.0053855025 0.0045407029 -0.0013810998 -0.0035872095 -0.0003499817 -0.0034936234 0.0041267912 0.0050852955 0.0312844379 0.1072978814 -0.0888237692 -0.0460688839 -0.0563067156 -0.0229715650 -0.0401664791 -0.0095284731 -0.0697520143 0.0237690654 -0.1139939661 0.0778902125 0.0011079598 0.0723988978 0.0308513995 -0.0113097289 0.0139078598 0.0611354805 -0.0395770955 -0.1231695717 0.0502847605 -0.0659520573 0.1793272473 -0.1347248779 0.0533093500 0.1096154158 -0.0805679570 -0.0540687035 0.1611556201 -0.0752411698 -0.0340631606 -0.1121594316 0.1383840933 -0.0165831425 -0.0173634984 0.0330439765 -0.0413499539 0.0049862658 0.0297556680 0.0517991041 -0.0399026934 0.0240930491 0.0002459715 0.0001534004 -0.0385288950 0.0135457273 -0.0212388978 -0.0249339260 0.0335586203 -0.0709487182 0.0503548825 -0.1018345542 0.0414077166 -0.0306118760 -0.0032278195 0.0713617600 -0.0265951253 -0.0869766783 0.0676564629 -0.0541002983 0.0434532814 -0.0336094558 0.0030737208 -0.0301399346 -0.0460313605 -0.0046537112 -0.0195461996 -0.0133915641 0.0504861755 -0.0136959035 -0.0147381688 0.0259189698 0.0029144234 -0.0311365309 -0.0120739524 -0.0131861314 -0.0604379182 -0.0840553168 0.0382201880 0.0978016302 0.0950323729 -0.0273751408 -0.0417441724 0.0389682799 -0.0253493590 -0.0400882267 -0.0506023684 -0.0145049672 0.0592883128 0.2972803005 -0.0224173911 0.0349035318 0.0615814429 -0.0591587839 0.0903814261 -0.0624119993 -0.0196052566 0.0248769221 0.0529167034 -0.1873776367 0.0315800183 -0.2422152025 -0.0754957543 -0.0517140360 0.0760593523 -0.0031565847 -0.0043747299 0.0105972200 0.0205015788 0.0094434549 -0.0163355454 -0.0233173389 -0.0343164494 -0.0035545742 -0.0229697671 -0.0158484720 -0.0103321597 -0.0096520336 -0.0481287008 -0.0208157018 0.0095738145 -0.0119568008 -0.0663726736 -0.0076335472 0.0309662667 -0.0216727321 -0.0033705545 0.0028512465 0.0018359480 0.0046735833 0.0079045936 -0.0638292677 0.0379616973 -0.0322821532 -0.0293456910 0.0049917469 0.0034557117 -0.0021729403 -0.0048974360 -0.0047934629 0.0047342587 0.0077445021 0.0073008039 0.0040465394 0.0104427639 0.0114056078 0.0027927806 -0.0021252972 -0.0031501039 0.0020357667 -0.0069411348 0.0023251290 0.0077892720 -0.0152467175 0.0115054490 0.0065811977 0.0093803920 -0.0042603590 0.0009090495 -0.0321093692 -0.0206177319 -0.0433770947 0.0354239177 0.0174505372 0.2700603794 -0.0101778778 -0.0669348772 0.0411642802 0.0115485608 0.0479486866 -0.0502362580 0.0031248377 0.0533015274 0.0424410954 -0.0552602752 -0.0348494454 -0.0514160325 -0.0061616231 -0.0246648911 -0.1323657768 -0.0496330706 -0.0911803429 0.0401791877 -0.0239194846 -0.0366960648 0.0107481684 -0.1995254225 -0.0252156179 0.0965662589 -0.1358296757 0.1420760031 0.0145619335 0.0529789528 0.0333963820 -0.0008720034 0.0488709374 -0.0727400037 -0.0170022837 0.0202398731 0.0135604661 -0.0210128582 0.0078696331 -0.0052011731 0.0250350915 -0.0011892659 0.0002842949 -0.0130120865 0.0108951342 -0.0233134242 0.0215636125 0.0018339702 -0.0066371264 -0.0086416861 -0.0032220506 -0.0017982446 0.0046345506 0.0014297658 -0.0038659716 -0.0039150425 0.0009751465 0.0056315758 -0.0015016088 -0.0100281801 0.0000399176 0.0000011980 0.0024684221 -0.0005871515 0.0033396170 0.0074130908 0.0009329467 0.0089770291 0.0176589202 -0.0040553198 0.0303716087 0.0093381419 -0.0204371153 0.0255994952 -0.0010316022 0.0009357690 0.0015825592 -0.0004965488 0.0023031996 0.0008619459 0.0002098442 0.0014853381 0.0032910454 -0.0008314034 -0.0000857607 -0.0023449660 -0.0001322501 0.0015324378 0.0021010172 0.0023022111 -0.0002481598 0.0005821611 -0.0010775788 -0.0016486741 0.0004109588 -0.0014212959 -0.0021351092 0.0001356780 0.0029538262 -0.0000992465 -0.0005044487 -0.0008606580 0.0012152998 -0.0043563683 -0.0003641058 -0.0022825085 0.0023906272 -0.0014642938 -0.0029477084 -0.0053984128 -0.0016050729 -0.0015695963 -0.0116852970 -0.0042921395 0.0026376598 -0.0071296816 -0.0017512170 0.0073084153 -0.0050886775 0.0107871407 0.0015038460 0.1042720962 0.0043229146 0.0123995379 0.0007089552 -0.0004285611 0.0006480316 -0.0001858758 0.0011176572 0.0003975147 0.0006472267 -0.0009057790 0.0006453553 -0.0012623547 0.0027181822 -0.0022998403 0.0023215846 -0.0020159368 0.0064558647 0.0053587669 -0.0077977133 -0.0003463968 -0.0065848664 0.0002832816 -0.0044783507 0.0038239719 0.0004525204 0.0002984912 -0.0001669753 0.0000222367 -0.0002176334 -0.0001689873 -0.0242266726 0.0241809486 -0.0123970532 0.0094295735 -0.0122918980 -0.0073898874 -0.0034697098 -0.0051902383 -0.0043638134 0.0104293088 0.0125427853 -0.0041026741 0.0007351671 -0.0112323800 0.0291368045 0.0231744984 0.0207101733 -0.0325072347 0.0019330394 -0.0085770602 -0.0191534630 -0.0011717800 0.0007080255 -0.0103147205 -0.0012907336 0.0208660463 0.0144471612 -0.0001789537 0.0002486170 0.0003975212 -0.0001226602 -0.0007784839 -0.0004025818 -0.0000767775 0.0001620663 -0.0000324762 -0.0036580498 -0.0166607692 0.0128849534 0.0146279309 0.0134671367 0.0083827408 0.0172976096 0.0062754617 0.0179101631 -0.0133929406 0.0147645401 -0.0074949090 -0.0019678491 -0.0184337115 -0.0106701711 -0.0008321701 -0.0076988324 -0.0144658231 0.0021177498 0.0074222819 0.0118822713 0.0316213796 -0.0368917150 0.0242158403 -0.0103438862 -0.0066588350 0.0072722776 0.0256848884 -0.0148869047 -0.0047463076 0.0005247626 0.0239227713 -0.0297163750 0.0299104527 -0.0038027084 -0.0258601556 0.0383403794 0.0071360945 -0.0289297232 -0.0213008741 -0.0235736919 -0.0051900435 -0.0050161296 0.0155281135 0.0393792280 -0.0067162966 0.0125930370 0.0268943497 -0.0089747700 0.0292184111 -0.0369858638 0.0513443952 0.0791611517 0.0043640540 -0.0222888795 0.0028273128 -0.0139397293 0.0508321619 0.0089316266 0.0373764263 0.0082473090 -0.0625760875 0.0210523187 0.0079093258 0.0065879293 0.0067989515 0.0044041995 -0.0036928137 -0.0104901602 0.0209201172 -0.0054090795 -0.0130459631 0.0006782153 0.0085021264 0.0229072817 -0.0144400284 -0.0655248369 -0.1035249039 0.0285166886 0.0731902394 0.1142613621 -0.0042646133 -0.0084117302 0.0296274664 -0.0066466154 -0.0187206016 -0.0526113519 0.0054141157 0.0746138728 0.2382915546 -0.0066059496 0.0132844055 -0.0098656274 -0.0177916736 0.0170999057 -0.0364347127 0.0058380614 0.0202569787 0.0579413272 -0.1041789384 -0.0578337331 -0.2437692043 -0.0254675161 -0.0332069943 -0.0131945318 -0.1401093736 0.1201013977 0.0462332298 0.0882792582 -0.1026988864 -0.0480077289 0.0829329072 0.0950006983 -0.0195125976 -0.0292447757 0.0462412806 0.0583983762 0.3827792416 0.0081233226 -0.0977543225 -0.0033873942 -0.0215992349 0.1394758326 0.0016635572 -0.0551731886 0.0635521324 0.0759666959 -0.0419875612 -0.0364007343 -0.2988601610 0.1428494779 0.3335288063 -0.0992811937 0.1038163632 0.0920257407 -0.0004715003 -0.0007010439 0.0001225802 -0.0007247870 -0.0003675305 -0.0002241271 -0.0008339252 -0.0010864688 -0.0008106052 -0.0017216585 -0.0014226658 -0.0000915929 0.0002980922 0.0000544204 -0.0001756840 -0.0015094292 0.0001825195 0.0014186947 0.0023817229 -0.0024204219 -0.0019028568 -0.0020423035 -0.0010795282 0.0019082170 0.0070964265 0.0005696693 0.0050740366 0.0055869348 -0.0009504648 -0.0146627376 0.0053429609 0.0035742470 -0.0030419500 0.0030016614 -0.0025001197 0.0051543615 0.0002428807 -0.0087507334 -0.0053709931 0.0016106396 0.0058046316 0.0021249329 0.0053775655 0.0004986045 0.0045978220 0.0049067461 0.0030162659 0.0043345956 0.0066262799 0.0016278909 0.0024682768 0.0047916367 0.0075509087 0.0113666064 -0.0005581080 -0.0031725819 -0.0033931634 -0.0062134838 -0.0006315745 0.0039647570 -0.0022189284 0.0019990496 -0.0020525709 0.0021252606 0.0012035257 -0.0020659102 -0.0098111134 -0.0018666180 -0.0018859182 0.0180627734 0.1030119974 0.1137649186 -0.0816974005 -0.2336522426 0.0039580927 0.0485544285 -0.0943799085 -0.0627025114 -0.1138823640 -0.0161836487 0.0526854979 0.1590283253 -0.0679371019 -0.1317867525 -0.0004253398 -0.0295506425 -0.0113087299 -0.2117579395 -0.1389676586 0.0921781557 0.0724936049 0.0173329757 -0.0300453598 0.1894765956 -0.1623712031 -0.1376900014 0.1047488544 -0.0791220010 -0.1139327746 -0.2266191288 -0.3360056727 0.0057053396 -0.0557086850 0.1494675359 0.0944595541 -0.0624943372 0.1348858609 0.0808944195 -0.0626619132 0.1406851671 0.0785748914 -0.0364661910 0.0086216571 -0.0816952186 -0.0217236295 0.0720908810 0.0640752612 0.1073373107 0.0018418367 -0.0199023284 -0.0478436449 -0.0889048231 0.0312441090 -0.0714540172 -0.1353297815 0.0076905327 0.1457007983 -0.0042134655 -0.0605295599 0.0776175996 0.0280007092 -0.0070968819 -0.0501425690 -0.0330499128 0.0505639857 -0.0066552117 -0.2049453382 -0.1860261158 0.0759815100 -0.1537210285 -0.2441762350 -0.1014705331 0.0958420270 -0.1283480381 0.0781444888 0.1736024987 0.0090790488 0.0900261720 0.1471359983 0.0961393313 -0.0007502844 0.0010890850 -0.0004888577 -0.0015003690 0.0002974499 -0.0071626312 0.0050639733 -0.0105447523 0.0042823774 -0.0011387537 0.0018857637 0.0006819221 0.0006528105 0.0008689944 -0.0009097033 -0.0007622913 -0.0009259549 -0.0009163167 0.0016935877 -0.0009920193 0.0018977942 -0.0014820424 0.0002383283 -0.0000548398 -0.0001546418 0.0000043847 -0.0005344037 -0.0005099729 0.0027682820 0.0003637028 0.0045222633 -0.0025393395 0.0014615411 -0.0032524493 0.0047123720 -0.0001105253 0.0019118038 0.0002374417 0.0012202946 -0.0016093084 -0.0021139635 0.0085814423 -0.0005909588 0.0012793848 -0.0104297928 -0.0056109338 -0.0009001878 0.0035922005 0.0018305347 0.0043123744 0.0039189913 0.0011993067 -0.0043545230 -0.0040459408 0.0021653448 0.0000687901 0.0006516644 -0.0036950013 0.0063483445 0.0046420397 -0.0005451189 -0.0011057649 0.0007832472 -0.0005260972 0.0046030946 0.0002273777 0.0016917112 0.0024688067 -0.0028813308 -0.0038159059 -0.0048971760 0.0000002394 -0.0032164512 0.0000157333 -0.0050153778 0.0035678232 -0.0026844660 0.0015944280 -0.0006009265 0.0057128194 0.0034553966 -0.0012251425 0.0016195106 0.0019633217 0.0017738844 0.0058207788 -0.0100519553 -0.0070265827 0.0029952592 -0.0028077790 0.0024456303 0.0000785300 -0.0000637819 -0.0071534484 0.0028483350 0.0041035961 -0.0013140081 -0.0048239276 0.0049738012 -0.0025923419 -0.0009573598 0.0021957375 -0.0044505578 -0.0008176086 0.0034101264 0.0040568343 -0.0004004576 0.0017482579 -0.0011337397 -0.0011047187 -0.0054832683 -0.0005362516 -0.0015958168 -0.0037365560 0.0003486607 -0.0038383777 0.0032161848 -0.0088856691 -0.0011741378 -0.0017919913 0.0025796258 0.0049962876 0.0002060364 -0.0072440834 -0.0021882653 -0.0045182040 0.0017531715 -0.0038332955 -0.0021343664 -0.0015572853 -0.0012936948 -0.0024982925 -0.0009567060 0.0018665994 0.0022251444 -0.0033035848 0.0000327516 0.0029832435 0.0009529174 -0.0026964742 -0.0037365361 0.0012433903 0.0018494928 0.0035192075 -0.0005385422 -0.0010742350 -0.0058860280 -0.0023752272 -0.0012346914 0.0010010532 -0.0031254129 -0.0003892341 0.0033706373 -0.0037924167 -0.0061953985 -0.0109403681 -0.0058438410 -0.0001204142 -0.0039726221 -0.0002294016 0.0027763096 -0.0002729709 0.0003964104 -0.0009598630 -0.0020524862 -0.0000079531 0.0067154590 0.0099449854 0.0012298519 0.0007546449 0.0006040778 -0.0013942316 -0.0023931568 0.0043974052 0.0018318163 0.0023743042 -0.0003890461 -0.0027753284 -0.0072440711 0.0008624064 -0.0011146993 -0.0004717261 -0.0003238791 -0.0042104953 -0.0104847691 -0.0054308689 -0.0020975867 0.0019024319 -0.0034310858 -0.0012808377 0.0036452087 -0.0056266341 -0.0014076379 0.0003069997 -0.0041816140 -0.0069905538 0.0052804840 -0.0054578145 -0.0074560734 -0.0033392081 -0.0020995113 -0.0037949029 -0.0010948910 -0.0023087398 -0.0083757382 -0.0165329306 0.0110149977 -0.0055438340 -0.0075348466 0.0080781539 0.0137045673 0.0168180555 0.0075425091 0.0062802684 -0.0025936074 -0.0065067765 -0.0294888663 0.0085047072 0.0232618701 0.0276653709 -0.0091131159 0.0088970449 0.0282855941 -0.0095455796 0.0000062845 -0.0708120461 -0.0216372409 -0.0071875783 -0.1278157130 -0.0450831307 0.0964815637 -0.0797369476 -0.0686734746 0.0395921997 0.0062461351 -0.0148698759 -0.0642132170 0.0572739501 0.0506327574 0.0166360744 0.1429984748 -0.1385492797 -0.0973845725 -0.1572987558 0.0652521091 0.0777099563 0.0026093746 -0.0250936247 -0.0421832244 -0.1193412370 0.0467981822 0.0422740247 0.1208769416 -0.1208405881 -0.1519729690 -0.0406986477 0.0490832187 0.0663305764 0.1066584349 0.1045269040 0.0269267212 -0.0083770550 -0.0527925585 -0.0300637917 -0.0088811077 -0.0085350004 0.0089220346 -0.0101729332 0.0153734278 -0.0249597319 -0.0081087043 0.0133137226 0.0055213337 0.0030458292 0.0054742799 0.0074085652 -0.0035217178 0.0056866407 0.0016485298 0.0000306268 -0.0005139316 0.0033042330 0.0087902362 0.0014747557 -0.0022584179 -0.0030466337 -0.0094667971 -0.0014947144 -0.0050770937 -0.0055385538 -0.0014988092 0.0025173300 0.0014301353 -0.0054048633 0.0086589729 -0.0110359000 -0.0087237707 0.0105452327 -0.0158152744 -0.0034380910 -0.0016437504 -0.0068690846 0.0049690518 -0.0012317888 0.0091221203 0.0040380463 -0.0048107556 0.0044677009 0.0029443064 -0.0096349237 0.0092733270 -0.0074813547 -0.0009628269 0.0005433636 -0.0012411221 -0.0008485572 0.0023415670 0.0016883156 0.0041280418 0.0000425140 -0.0004102950 -0.0021914828 -0.0026593529 -0.0005940916 -0.0027161827 -0.0048558955 -0.0000995353 0.0060097462 -0.0005720492 -0.0016687455 0.0007723303 0.0017727767 -0.0058112812 0.0006682090 -0.0002515251 0.0066526294 0.0023333608 -0.0081428002 -0.0007395380 0.0022010790 -0.0055426200 -0.0115142178 -0.0035086207 0.0026820874 -0.0035613217 0.0048438819 -0.0013407247 0.0027116423 -0.0034178839 0.0123869223 -0.0623602629 0.0044232038 -0.0169938580 0.0056874346 0.0009569697 -0.0025970640 0.0005710577 -0.0002503715 0.0007830288 -0.0014383984 -0.0029178216 -0.0013833655 0.0002298431 0.0037534839 0.0016908162 -0.0009661850 -0.0033844807 -0.0017724256 0.0014224032 -0.0061223301 -0.0015877008 -0.0002426620 -0.0030411988 -0.0017706203 0.0024359774 0.0015704531 -0.0000290802 -0.0001121402 0.0000274136 0.0009233355 0.0005089783 0.0052948253 0.0080415938 -0.0027575518 -0.0066003466 0.0123712605 -0.0066208755 0.0146026745 -0.0125386275 0.0013062204 0.0017441867 0.0034947841 -0.0011860034 -0.0003471173 -0.0061994522 0.0242408086 0.0156319358 0.0105808897 -0.0161159197 0.0049710138 0.0043181625 -0.0030365893 0.0017676279 -0.0085690912 -0.0137532849 0.0045126768 0.0126885890 0.0101979525 -0.0007516926 0.0011426998 0.0007009231 -0.0006233911 -0.0016197198 -0.0009143755 -0.0006935122 0.0016073112 0.0010594734 0.0012502466 0.0134104562 -0.0102507633 0.0184481719 0.0088798419 0.0157248177 0.0321990086 0.0153878624 0.0171151992 -0.0290127232 -0.0206626421 0.0239844342 0.0099493470 -0.0105070543 -0.0317317896 0.0063424723 -0.0055700947 -0.0197745083 -0.0160998707 -0.0589009943 0.0817293142 0.0571103167 -0.0252660654 0.0118627995 -0.0129855489 0.0345975447 -0.0166819693 0.0274891550 -0.0569208036 0.0192818357 -0.0526169818 -0.1065508808 0.0775884545 0.0312204479 -0.0131537070 -0.0097588226 0.0451659951 -0.0123397090 -0.0166158873 -0.0411354374 0.0348892162 -0.0171181344 0.0027083897 0.0040086560 0.0309311065 0.0022027554 0.0054980018 0.0130945122 -0.0869583134 0.2179030270 -0.0855287179 0.0210844147 0.1202954825 -0.0102424420 -0.0069404539 -0.0515886289 0.0127372673 0.0474628006 -0.0127876901 0.0330877415 -0.0421446747 0.0624978912 -0.0182008758 0.0120232355 -0.0001535877 0.0214634936 0.0013295737 -0.0199443199 -0.0131952300 0.0144324993 0.0053326489 -0.0254559295 -0.0029936266 0.0237620562 0.0165223956 -0.0140112222 -0.0052406979 -0.0159554980 0.0141066077 0.0139441448 0.0396691314 0.0222981450 0.0053251699 -0.0149223864 0.0364508297 -0.0035619348 -0.0301481072 0.0434585159 0.0569936723 0.1102412529 0.0747246594 -0.0050241239 0.0787998614 -0.0166823737 0.0036671507 -0.0008531957 -0.0205881253 0.0108821383 0.0150951863 -0.0365589686 -0.0307530832 -0.0970671622 -0.0475493680 -0.0294801928 0.0215450551 0.1080753598 -0.0430287687 -0.0868300178 -0.0676667366 0.0302882350 0.0320883206 0.0202256222 0.0273764236 -0.0116703863 0.0457902852 -0.0213427205 -0.0301995287 -0.3124599254 0.1975163120 0.2103701803 -0.0545271666 0.0256734142 0.0391072464 -0.0186124009 0.0027288350 0.0434210712 -0.0487357533 0.0223403292 0.0684368422 0.3757215452 -0.2154308170 -0.2184135314 0.2391711402 -0.0963437872 -0.1090615117 0.0036446923 0.0018407040 -0.0001818095 0.0017167748 0.0037921342 -0.0015112754 0.0058534246 0.0065458606 -0.0021785775 -0.0015806907 0.0003344531 -0.0002254830 -0.0018576408 -0.0023694602 0.0016204946 0.0054391224 0.0009954264 -0.0020002911 -0.0138264955 0.0080532173 0.0023316197 0.0010067104 0.0016975404 -0.0041396422 -0.0262544775 -0.0207424205 -0.1312320812 0.0394521733 0.1181848597 0.2396057458 0.0005871011 0.0346832503 0.0223560280 -0.0411499667 -0.0912347102 -0.1702288572 -0.0104495749 0.1029329380 0.2035286297 0.0075385235 0.0250206586 0.0708014604 0.0055862416 0.0122362275 0.0270342057 -0.0234162897 0.0377191286 -0.0626689560 0.0075396309 -0.0001813786 -0.0534087172 -0.0890065285 0.0539767566 -0.0637429615 0.1313110476 -0.0992394291 0.0257579260 -0.0186020743 -0.0858661461 -0.0799224459 -0.0401290063 0.0698631356 0.0234536621 -0.0219187903 -0.0160708213 0.0174698394 -0.0007065841 0.0038706665 -0.0095509050 0.0030047500 0.0044574583 0.0219110927 -0.0038282965 0.0111790929 -0.0017961095 -0.0027890505 0.0062244950 0.0062106083 0.0000222526 0.0021024515 -0.0021941069 0.0058985957 0.0028784629 -0.0054780872 -0.0041022517 -0.0100104878 -0.0011021408 0.0034030733 -0.0045166225 0.0000936186 0.0033658184 -0.0008566552 -0.0017014897 0.0114889912 -0.0124674055 -0.0017487570 -0.0023974454 -0.0099776526 -0.0159053947 -0.0071758283 0.0071800136 -0.0128008235 -0.0031328095 0.0073015961 0.0036283784 -0.0026015815 0.0056123345 0.0046894904 -0.0020737903 0.0053811950 0.0063115110 -0.0022445198 0.0011784430 -0.0035948145 -0.0004712931 0.0023524750 0.0024208597 0.0039311885 0.0001098524 -0.0011094638 -0.0013696022 -0.0034358113 0.0019620527 -0.0027433604 -0.0056683046 0.0001889974 0.0059847868 -0.0000986901 -0.0028609285 0.0044862228 0.0005220924 0.0026145523 -0.0029741523 -0.0018286930 -0.0006442102 -0.0034242631 -0.0066083379 -0.0072144388 0.0042568205 -0.0058146476 -0.0077882003 -0.0034301361 0.0033971229 -0.0054265679 -0.0003221450 -0.0023324139 0.0040998954 -0.0091768360 0.0058194929 -0.0935933824 -0.0000818245 -0.0013610640 -0.0025470049 -0.0001694286 -0.0002767191 -0.0006542509 -0.0008587697 -0.0025073548 0.0000590482 0.0008945042 0.0004778646 0.0007271619 -0.0042284174 -0.0019415578 0.0033554328 0.0038427132 -0.0004688887 -0.0082399316 0.0102701146 0.0028379173 0.0007636557 0.0021228329 0.0054394537 -0.0061847582 -0.0002352729 -0.0000633799 -0.0000558889 0.0000202994 0.0003190477 0.0000134205 0.0140102467 -0.0284549546 0.0141744848 -0.0026150793 -0.0027345305 0.0147580359 -0.0203530969 0.0252826449 0.0004178731 -0.0112026419 -0.0112950993 0.0043499222 -0.0008914866 0.0190827534 -0.0414970377 -0.0259751798 -0.0154364153 0.0254767271 -0.0060968271 0.0040148422 0.0201084386 0.0001052752 0.0047498187 0.0204718533 -0.0022192324 -0.0312456531 -0.0228498258 -0.0003613425 0.0005031651 0.0001728323 0.0001398734 -0.0000179465 0.0002807057 -0.0002508342 0.0001147942 0.0002290435 -0.0084075113 -0.0093150291 0.0060658867 0.0161835158 -0.0006772963 0.0193528487 0.0230143924 -0.0028014274 0.0188498009 -0.0014404472 0.0374680502 -0.0332637653 -0.0096014511 -0.0257172027 0.0061894814 -0.0068580628 -0.0144972190 0.0110202534 0.0552489459 0.0638610078 -0.0372457752 0.0492121085 -0.0246877040 0.0021650598 -0.0191638698 -0.0320694670 0.0264658364 0.0373917425 0.0666254339 -0.0680485537 0.0645217785 0.1481263813 -0.1262367169 -0.0101684349 0.0141450667 -0.0035714690 -0.0056444650 0.0118693927 -0.0081040983 -0.0161229431 0.0239457070 -0.0122846492 0.0190887370 -0.0249651349 0.0186737885 0.0180599096 -0.0280980128 0.0219208458 0.0310605715 -0.0846437436 0.0287489495 0.0576525300 -0.1231576152 0.0302177448 0.0063972007 -0.0282784639 0.0137786211 -0.0597843494 0.1862307492 -0.0444754652 -0.1116728231 0.2433083931 -0.0383185824 0.0066380235 0.0160048896 0.0050944240 0.0063388232 0.0033671400 -0.0150324533 0.0006402648 0.0062017820 -0.0067589311 -0.0031439997 0.0091896333 0.0005364734 -0.0184989685 -0.0369603198 -0.0936307840 0.0160724672 0.0460423473 0.1569565165 0.0076218230 0.0059154990 -0.0297496584 -0.0014019150 -0.0149959639 -0.0779242075 0.0729098756 0.1801575461 0.4054619089 0.0476976096 0.0778812510 0.1851566333 0.0122929769 -0.0277583575 0.0048083144 0.0190083638 0.0203743522 0.0638236102 -0.0716450257 -0.1712559210 -0.3757677479 0.0028859324 -0.0224707023 -0.1041472665 0.0068867583 -0.0012097023 0.0092660994 0.0007148471 -0.0078469721 -0.0075791334 -0.0120876205 -0.0214881042 -0.0084959631 -0.0121006552 -0.0097756910 -0.0144005620 -0.0428775129 -0.0122188460 0.0048036430 -0.0176651184 0.0162412929 -0.0498369413 0.0025361398 0.0030847875 0.0119596856 0.0085511886 0.0093836689 0.0195862948 0.0406324274 -0.0159954408 -0.0078515623 0.0582309779 0.0176132471 -0.0045026898 -0.0001111441 0.0010237858 -0.0005124405 0.0009693461 -0.0017659974 0.0017508651 -0.0008487009 -0.0012234896 0.0019703149 0.0055351891 0.0041851803 0.0005785467 -0.0004165793 0.0003254540 -0.0005322326 -0.0023433335 0.0007577716 0.0006748212 -0.0000958808 0.0014150841 0.0019284236 0.0057737656 -0.0016937223 0.0009482356 0.0030151764 -0.0021347613 -0.0128750335 0.0141588941 0.0096087334 0.0140142653 0.0069674450 0.0050842724 0.0015212431 -0.0040085780 -0.0097579377 -0.0174487853 -0.0037790137 0.0075976772 0.0220982918 -0.0005838076 0.0104003879 0.0098972482 0.0069115055 0.0025487167 0.0047274899 -0.0000944029 0.0083658567 -0.0085851864 0.0025428384 0.0008322290 -0.0064368733 -0.0102725156 0.0077800725 -0.0144228270 0.0203227040 -0.0182372336 0.0016070730 -0.0090629277 -0.0166062897 -0.0112434105 -0.0050619258 0.0140315484 0.0047831556 -0.0033787153 -0.0025887895 0.0022673833 0.0001907075 -0.0006240497 -0.0013160936 0.0042276128 -0.0038234523 0.0058859154 0.0120150912 -0.0050969738 0.0148615894 -0.0006628447 -0.0001685820 -0.0038276623 -0.0042589934 0.0024079320 -0.0068385088 -0.0045263015 0.0007418410 -0.0048669119 0.0023371608 0.0009506099 0.0032113262 0.0046651158 -0.0027719562 0.0087349172 0.0032397144 -0.0018042565 0.0062816241 0.0115894194 -0.0086296533 0.0220647360 -0.0167392009 0.0111794167 -0.0248531437 -0.0258398247 0.0139963653 -0.0374140513 0.0004322316 -0.0018492502 0.0005755552 0.0014874618 -0.0010261177 0.0000799127 0.0039609167 -0.0032440808 0.0043283595 -0.0004319061 0.0000342207 -0.0011565290 0.0003633349 -0.0005083401 0.0002257396 -0.0007291577 0.0000398186 -0.0001404644 0.0008764092 0.0003335234 0.0011707015 0.0005648380 0.0007881464 0.0001621731 -0.0012337767 0.0002379220 -0.0001001660 0.0013974355 -0.0007735221 0.0047848515 -0.0014658822 0.0009202945 -0.0041154185 -0.0023906879 0.0020016576 -0.0039093110 -0.0000605270 0.0009253848 0.0028156845 -0.0000228857 -0.0002256110 -0.0010913862 -0.0002881488 0.0014254812 -0.0005841892 -0.0013934711 0.0027775434 -0.0138800073 0.0037877622 -0.0051212480 0.0070910227 0.0001805786 -0.0000001470 -0.0012664813 -0.0004049816 -0.0016381222 -0.0001513648 -0.0004969378 0.0003277016 0.0004851670 -0.0016751593 0.0006305800 -0.0017958011 0.0019034726 0.0003927992 0.0002337375 0.0031973995 -0.0013279968 0.0012216544 0.0016232839 -0.0005857386 0.0015911612 0.0002468759 0.0000730393 -0.0002085409 0.0000177837 0.0005873227 0.0003071170 -0.0034539821 0.0002142569 -0.0006543005 0.0053542475 -0.0089954622 0.0013844123 -0.0045151941 0.0036759209 -0.0000382942 -0.0058877760 -0.0063509611 0.0125208876 -0.0009846523 0.0069069997 -0.0101767288 -0.0081504664 -0.0010011712 0.0040909901 -0.0012081847 -0.0051767376 -0.0071213821 -0.0017783839 0.0060454222 0.0022078874 -0.0030818622 0.0058279250 0.0033249854 -0.0004688201 0.0008482273 0.0005484333 -0.0001984912 -0.0004990851 -0.0001360474 -0.0004376799 0.0004896109 0.0006806019 0.0001621268 -0.0007440374 -0.0003640641 0.0007430506 0.0003142135 -0.0002645517 -0.0002345302 0.0003519607 -0.0016448297 0.0024145088 0.0061178163 -0.0065544917 -0.0031194411 -0.0044562019 0.0062649963 -0.0028973783 -0.0035925901 0.0059647887 0.0018575596 0.0003244555 -0.0000757640 -0.0044799506 -0.0118697794 0.0085704748 -0.0005993124 -0.0068469548 0.0045889609 0.0092255282 0.0327509740 -0.0258749430 0.0199222281 0.0436259156 -0.0356325350 0.0304520612 -0.0611845650 0.0178906635 0.0206416591 -0.0590910192 0.0128279434 0.0074938058 -0.0129272713 0.0080543221 -0.0328651073 0.0703962753 -0.0195736601 -0.0385959950 0.0626038603 -0.0192327321 -0.2102816349 0.4013309664 -0.1297581362 -0.1982108539 0.3967090944 -0.1226031229 -0.0011884434 0.0154125162 -0.0064086120 0.2090192513 -0.4382101305 0.1284742120 0.2241679086 -0.4538994179 0.1184072194 -0.0005941283 0.0017927900 -0.0015113999 0.0007823996 0.0023142725 -0.0001964221 -0.0009176522 -0.0026249910 0.0050732921 0.0041063662 -0.0044425347 -0.0014000394 -0.0001115733 -0.0033963369 -0.0079060718 0.0011471763 0.0057732740 0.0121867441 -0.0020563573 -0.0002286974 -0.0032406426 -0.0051091045 -0.0026670644 -0.0058748802 0.0053757865 0.0172511489 0.0410731232 -0.0027772075 0.0112216082 0.0190431402 0.0020832116 0.0007426606 0.0005476414 0.0047615795 0.0005068763 0.0064387117 -0.0116271192 -0.0142511437 -0.0399405827 0.0034021973 -0.0038763669 -0.0166696723 0.0005726476 -0.0015947202 0.0047811132 0.0012986782 0.0002090098 -0.0005350215 -0.0038309002 -0.0072117993 -0.0003230323 -0.0023377977 -0.0011058027 -0.0019100226 -0.0066024397 -0.0096074536 -0.0049972107 -0.0015315759 0.0027845865 -0.0098684849 -0.0000766817 0.0014362731 -0.0015495599 0.0004858569 0.0018678919 -0.0004933001 -0.0013050747 0.0016399465 -0.0018676422 0.0025146982 0.0024653831 -0.0015620181 -0.0000923215 -0.0005241526 -0.0001329088 -0.0032675954 -0.0015481081 0.0008186072 0.0012600493 0.0018514712 0.0009121935 -0.0007056442 0.0015444380 0.0015315664 0.0003675496 -0.0002751022 0.0001534251 -0.0032481768 0.0050239696 0.0050321833 0.0044034331 -0.0052850644 -0.0020625121 -0.0044907129 0.0012830786 -0.0004868730 -0.0085997872 0.0000820526 -0.0079401362 -0.0095302460 0.0102364103 0.0230038081 -0.0074216896 -0.0001784335 -0.0035044383 -0.0034445046 0.0024814266 -0.0012078956 -0.0019435971 0.0088722612 0.0070213487 -0.0096789856 0.0034952454 0.0125279846 0.0084200392 -0.0038305771 -0.0078141905 -0.0112823560 -0.0021736811 -0.0092124818 -0.0028196445 -0.0083619838 -0.0119802492 -0.0196721749 -0.0028293617 -0.0130783863 0.0174739999 -0.0121083248 0.0021855370 0.0038132456 0.0002065478 -0.0049803190 -0.0040146578 0.0053927760 0.0001286765 -0.0040194693 -0.0018299058 0.0007587608 0.0006512622 -0.0007927296 0.0042472721 0.0080180019 -0.0046178153 0.0125873151 0.0077284684 0.0051641664 0.0115442918 -0.0030720007 0.0053865765 0.0018222309 0.0001492242 0.0021890523 -0.0029855478 -0.0020631662 0.0034790032 -0.0040732413 -0.0010030376 -0.0048245672 0.0012217341 0.0074615443 -0.0010658158 0.0020677071 0.0020249699 0.0000207204 0.0005191399 0.0144398203 -0.0079692997 0.0227983786 -0.0088228774 -0.0003082593 -0.0146131373 -0.0117450406 0.0159110085 -0.0241171771 -0.0028010063 0.0008666894 0.0015389744 -0.0000254697 0.0032617395 0.0031748177 0.0026854653 0.0005371856 0.0127341707 -0.0020161149 0.0010581268 -0.0030467275 -0.0002545772 0.0015502759 0.0015452480 0.0005071429 -0.0002569416 -0.0025985357 0.0010755049 -0.0023215082 0.0050168802 -0.0009372489 -0.0030430799 0.0013448711 0.0022183107 0.0003093975 -0.0037621281 0.0084218408 -0.0026849635 0.0181954503 -0.0099646363 0.0020383215 -0.0188591449 -0.0061818329 -0.0026492960 -0.0173256049 0.0080827938 -0.0045542081 0.0100242854 -0.0018281447 0.0018171820 -0.0016670295 -0.0019565253 -0.0061703543 -0.0006226771 -0.0019738406 0.0109179047 -0.0133612803 -0.0019619597 -0.0005687036 -0.0007696635 -0.0005145645 0.0007480298 -0.0014953903 -0.0003308082 -0.0028867001 0.0002714837 0.0003148051 0.0010609520 0.0002887865 -0.0037495247 -0.0039901286 0.0001685902 0.0033137451 0.0045127692 0.0002829672 0.0057897493 0.0047806777 0.0015536680 0.0045380613 0.0028437850 -0.0025098616 0.0000325791 0.0002463757 -0.0002134956 0.0000677527 0.0002006431 0.0000571164 -0.0141796691 0.0020737041 -0.0017273192 0.0127545589 -0.0216283259 0.0031117503 -0.0161075684 0.0076586859 -0.0061414206 -0.0110389246 -0.0077235049 -0.0097011241 0.0011982144 0.0031723473 -0.0386290459 -0.0145147083 -0.0149581046 0.0230185751 -0.0075182958 -0.0066965272 0.0035051164 -0.0024638037 0.0131525770 0.0207078268 -0.0054828710 -0.0133195934 -0.0114322127 -0.0005226706 0.0007974557 0.0006545574 -0.0000486666 -0.0006893487 -0.0000879408 -0.0005756573 0.0002273852 0.0006583603 0.0017926259 -0.0007936138 0.0096257547 -0.0235383200 -0.0419479234 0.0429819228 -0.0098216635 -0.0528710570 0.0523369287 0.0016606147 -0.0014575390 0.0134392975 0.0184436801 0.0594478949 -0.0555611667 0.0242138166 0.0432003971 -0.0524189007 0.1532950938 0.3223441636 -0.2972738086 0.1319400678 0.3428482165 -0.2864745637 0.0007319825 0.0045591897 -0.0054322387 -0.1573854466 -0.3843481664 0.3186146109 -0.1734573415 -0.3572317109 0.3051527629 0.0043376635 -0.0029620962 0.0000441754 0.0059735798 -0.0019196423 -0.0032707161 -0.0038633028 -0.0012872458 -0.0017634587 0.0007824785 0.0059373619 0.0063666918 -0.0003380044 0.0038868814 0.0044730395 -0.0113356168 0.0250915449 -0.0091111436 -0.0018396054 0.0248804302 -0.0054173478 -0.0037689765 -0.0032740895 -0.0008976830 0.0202274734 -0.0107492383 0.0103279737 0.0095509255 -0.0122682219 0.0113365716 0.0025305519 -0.0041484872 -0.0017228736 -0.0038004612 -0.0006354290 0.0005163605 0.0037549737 -0.0004406688 -0.0035659476 -0.0009567123 0.0027131787 0.0044804415 -0.0019263001 0.0007773596 0.0030803689 -0.0013646349 -0.0036010463 0.0029042518 0.0035307444 0.0000743935 -0.0009166865 0.0071911169 0.0031378622 -0.0020335888 0.0001999164 -0.0014363795 -0.0057168073 0.0104978091 -0.0002844978 0.0027735217 0.0009539336 -0.0077456093 0.0019484595 -0.0029285536 0.0011454324 -0.0020942314 0.0115753435 -0.0051691660 0.0104597256 -0.0005645052 0.0054121334 0.0092605637 -0.0029798931 0.0076305104 -0.0015440834 -0.0002114341 -0.0034229580 -0.0040527377 -0.0004691541 0.0096946791 -0.0032371275 -0.0070438196 -0.0032624817 -0.0015382442 0.0324653111 0.0017996119 -0.0081528930 0.0035654091 -0.0066415142 -0.0104951095 0.0062097120 -0.0013645137 0.0037720028 0.0098585740 -0.0027976015 0.0087623481 -0.0197586755 0.0114223912 0.0194620186 -0.0017122754 0.0173516400 0.0197782900 -0.0009753364 0.0000207988 -0.0004519066 -0.0014832662 -0.0030328223 0.0019735527 -0.0016265977 -0.0019953344 0.0021434931 0.0038070031 0.0038448152 0.0013785438 0.0002994773 0.0007812046 -0.0005970100 -0.0050832913 0.0015167784 0.0034291608 0.0047870825 -0.0030591502 -0.0005229355 0.0015904868 -0.0009979651 0.0016528969 0.1331358437 -0.0478559923 0.0139147136 0.2194774937 -0.1066710340 -0.0448513512 0.1540889705 -0.0745165381 0.0146654666 0.0213180827 0.0346593728 0.0128141398 -0.0182842508 -0.0609524689 0.0237129009 0.0177690344 -0.0490097782 -0.0081464320 -0.0540224469 0.0394155810 0.0065360063 -0.0611284276 -0.0847132044 -0.0376240185 -0.0719136477 -0.0319009186 -0.0255742588 -0.1183937501 -0.0776181335 -0.0420014243 0.0183277970 -0.0026223272 0.0272491550 -0.0675321548 -0.0581689038 -0.0194768255 0.0043717403 0.0244341067 0.0082785743 0.0099565382 0.0075933390 -0.0046157566 -0.0009244218 -0.0020071085 0.0096385617 0.0018415406 -0.0073230837 -0.0120054053 0.0039811964 -0.0194286013 0.0038198326 0.0052627824 -0.0098795923 -0.0080643282 -0.0043149454 -0.0012810728 -0.0007397808 -0.0079525666 -0.0033997391 -0.0014165885 0.0051174018 0.0121426724 0.0017374434 -0.0046917357 0.0008455356 0.0068661104 -0.0008507190 0.0008629114 0.0052479206 0.0037828087 0.0024029924 0.0233809099 -0.0061325015 0.0172539117 -0.0006948385 -0.0114365669 -0.0057573498 -0.0081280842 0.0016301327 -0.0067676067 -0.0027079293 0.0040364730 -0.0038540809 -0.0028238189 0.0101575174 -0.0094552345 0.0055723426 0.0007725966 -0.0013419765 -0.0002199873 0.0002328533 -0.0014169558 -0.0015148533 -0.0059853624 0.0009073728 -0.0066503469 0.0057758663 0.0005246790 0.0099268710 0.0043361553 0.0029318165 0.0050399634 -0.0078210426 0.0015880567 -0.0051085285 0.0186488594 -0.0081479494 0.0509745613 -0.0252333916 0.0141199658 -0.0580670330 -0.0151084872 0.0086479117 -0.0396583993 0.0163482933 -0.0027630921 0.0536442636 0.0044511315 -0.0019941194 0.0066804706 0.0022184214 0.0070715645 -0.0017931514 0.0073973688 0.0002299810 0.0414917723 -0.0253858733 0.0052432613 -0.0110855183 -0.0004735767 0.0014895760 -0.0003521785 -0.0003270900 -0.0013454660 0.0005744833 0.0005700795 0.0005222610 0.0001595881 -0.0052211420 -0.0013455821 -0.0020257501 0.0046425728 0.0033940212 0.0018784580 0.0071453221 0.0007776401 0.0014338571 0.0058049991 0.0001806590 0.0010002937 0.0002187105 0.0001475742 -0.0002868729 0.0001996599 -0.0003307259 -0.0001534405 -0.0159047853 0.0034938762 -0.0028473868 0.0159682114 -0.0256949716 0.0030461246 -0.0122485980 0.0049472523 -0.0043754305 -0.0097788072 -0.0094556511 0.0114030922 0.0006985567 0.0079156673 -0.0251092420 -0.0170056738 -0.0082371250 0.0154413327 -0.0065186372 -0.0140991941 -0.0118777931 -0.0047427359 0.0185860372 0.0159840329 -0.0092698811 0.0001387608 -0.0021740633 0.0000013202 -0.0001134624 0.0000379461 0.0000642997 -0.0009703376 -0.0003882284 -0.0004426154 -0.0005920181 0.0004422875 0.0396905995 -0.0035588685 -0.0105959939 -0.0540932933 -0.0261434063 -0.0088611478 -0.0813631099 -0.0380033087 -0.0382253622 0.0682569476 0.0234752873 -0.0380536615 -0.0382311172 0.0480321773 0.0693660250 -0.0326173172 0.0121476652 0.0403815067 0.0335900784 0.1702790445 -0.2000701751 -0.1145742429 0.1492767421 -0.0960535100 0.0629740190 -0.0650719421 0.0213830537 -0.1076567756 0.1367935279 -0.0408144080 0.0538834290 0.1963736331 -0.1149423801 0.0349625250 -0.0145075497 -0.0018562899 0.0510819095 -0.0015288710 -0.0243618441 -0.0492002326 0.0313025482 -0.0232203030 0.0217683481 0.0009127138 0.0548534306 0.0233415132 -0.0116964976 0.0329670815 -0.0636858362 0.1757583668 -0.0649815951 0.0441175980 0.1112511777 -0.0032945977 -0.0226312519 -0.0622594681 0.0082219125 0.0260591623 0.1430780002 0.0079957625 -0.0752832595 0.1893364038 -0.0130830560 -0.0409527623 -0.0179506084 -0.0677202700 -0.0038278822 0.0549415656 0.0588160321 0.0279437449 0.0019054059 -0.0391660516 -0.0094332264 0.0320573709 0.0343348857 0.0565433923 -0.0008357735 -0.0005762854 0.0142990490 0.0850601859 -0.0722373538 -0.0790315608 0.0061457972 0.0138433578 -0.1673818488 -0.0628876212 0.0635706729 -0.0302576929 -0.0282580228 -0.0493485637 -0.2461317968 0.0507745683 -0.0120953783 0.0003319844 0.1535259467 -0.0498486299 0.0891982051 -0.0636998325 -0.0014616029 -0.1755947068 0.1850084033 -0.0005776441 0.0999877303 -0.0403125444 0.0017597696 0.0261492804 0.0451759412 -0.0594388557 -0.0272013834 -0.0108190338 -0.0235600166 0.0322887472 0.0924087379 -0.0461628483 -0.0217517053 -0.0509898380 -0.0347220444 -0.0201087104 0.1926003466 0.1283402887 -0.0869586132 -0.0155117616 0.0065299841 0.0141680010 0.0180362628 0.0491053508 0.0351820377 -0.0119423528 0.1108336750 0.1403058862 -0.0741693285 -0.0693162211 0.1752512371 0.0183044771 0.0463095527 -0.0015823946 -0.0003994115 -0.0000393765 -0.0003781646 -0.0016305878 0.0008082262 -0.0031976600 -0.0038265241 0.0007565377 0.0012614063 0.0006756540 0.0001628866 0.0001749136 0.0012557532 -0.0005795173 -0.0035447706 0.0005134661 0.0018028941 0.0067438082 -0.0060439857 -0.0032394203 -0.0021927639 -0.0007557095 0.0028877004 -0.0330090061 0.0211997626 0.0309676455 -0.0532455851 -0.0047732433 -0.0194361422 -0.0395601704 -0.0011967670 -0.0066364688 0.0124724465 0.0354260131 0.0588568492 0.0150619660 -0.0033944382 -0.0680848181 -0.0407365779 0.0023108229 0.0743743463 0.0483779879 -0.0175987494 -0.0296532234 -0.0794903853 -0.0408119651 -0.0543881610 -0.0388310582 -0.0612842137 -0.0699445527 -0.1096105111 -0.0518160280 -0.0795842975 0.0865741881 -0.0634607251 0.0060079955 0.0180188769 0.0422908982 0.0310761731 -0.0225870655 0.0095125953 0.0002451490 -0.0223273755 -0.0096241707 0.0168650039 -0.0071147823 0.0088323909 -0.0220954935 -0.0035172636 0.0517596897 0.1510377206 0.0334862166 0.2071646068 0.0795042678 -0.0749099152 0.1322928044 0.0884327086 0.0434828955 0.0311613315 -0.0263071057 0.0599856198 0.0594412433 -0.0272403381 -0.0633014531 -0.1489119597 -0.0118919406 0.1049633667 -0.0071343943 -0.0564220376 0.0315105988 -0.0211624127 -0.0267995642 0.0856218839 -0.0766850147 -0.0328738914 -0.0040233502 -0.1718993823 -0.0709251566 0.0608765460 0.1843126142 -0.0481799193 -0.0315985721 0.0617876730 0.0397144792 -0.0350962357 0.0720801111 0.0483448275 -0.0594650073 0.0915132973 0.0810356020 -0.0176432856 0.0190746441 -0.0164241078 -0.0081326126 0.0262372359 0.0197474747 0.0438042063 -0.0004599840 -0.0010827812 -0.0320574433 -0.0335894706 -0.0098162130 -0.0336581853 -0.0634075916 -0.0047487430 0.0702327282 -0.0061241163 -0.0154803327 0.0050644467 0.0186713917 -0.0763524727 0.0269823822 -0.0398921471 0.1296968315 0.0393875149 -0.1065104666 0.0158471724 0.0168426410 -0.0585607369 -0.1519238874 -0.0318967476 0.0346665553 -0.0443409034 -0.0487364128 -0.1029623521 0.0032262582 -0.0766394934 -0.0086278073 -0.2375539798 -0.0256313685 0.0017025740 -0.0119360054 -0.0003819509 -0.0091189695 -0.0061582437 -0.0039421008 -0.0209819715 -0.0049438205 -0.0131192469 0.0001166546 0.0034721899 -0.0098230105 -0.0139103585 0.0059582661 0.0123059830 0.0153187549 -0.0082938176 0.0229678465 0.0130914811 0.0008582423 0.0139689771 0.0138075769 -0.0098949757 0.0095204605 0.0030521738 -0.0027773301 0.0009967054 0.0051192796 0.0018947994 -0.0297332577 -0.0171873090 0.0071900357 0.0325100739 -0.0622104543 0.0230864111 -0.0758183885 0.0524117224 -0.0203079748 -0.0393511050 -0.0284142233 0.0050197108 -0.0007398310 0.0413262486 -0.1151655992 -0.0441561360 -0.0360789620 0.0581736327 -0.0230107943 -0.0113878065 0.0277589019 -0.0068428496 0.0413179417 0.0719691209 -0.0184247113 -0.0639964578 -0.0497401927 -0.0103415683 0.0144360015 0.0112978894 -0.0038208248 -0.0179628121 -0.0076058689 -0.0081599874 0.0104007244 0.0099417849 -0.0142053727 -0.0002662174 0.0035824142 0.0200740017 0.0190949357 -0.0167056999 0.0222075093 0.0263871429 -0.0073210415 -0.0205147332 -0.0134169251 0.0142643003 0.0091274699 -0.0263669151 -0.0070129253 0.0060423959 -0.0113705118 -0.0010229712 -0.0617323512 -0.1644339071 0.1587807088 -0.0230965268 -0.1382792879 0.1202584990 -0.0173703529 0.0243284633 -0.0089653299 0.0676725051 0.0444766992 -0.0565090295 0.0189895888 0.0046763435 -0.0218218968 0.0293964053 -0.0093792339 0.0018476972 0.0450735891 -0.0004376391 -0.0245459335 -0.0380589827 0.0049823937 -0.0182444875 0.0202419753 0.0173259868 0.0545633480 0.0168743486 0.0056021906 0.0341188882 -0.0403556631 0.1270974753 -0.0439813646 0.0351032841 0.1086395814 -0.0078303961 -0.0339111090 -0.0392411116 -0.0053588432 0.0706501200 0.0831428436 0.0287296416 -0.0098000656 0.0864191260 0.0330705537 0.0112679547 0.0043657846 0.0206959283 0.0007663850 -0.0172655768 -0.0168440730 0.0330363108 -0.0037833449 -0.0369512138 -0.0104584294 0.0268100335 0.0412970683 -0.0099344463 0.0017231133 0.0178251940 -0.0040386137 -0.0274589148 -0.0192403565 0.0185663948 -0.0039283329 0.0150348434 0.0438332179 0.0210330172 0.0068398363 -0.0227709253 -0.0580145435 -0.1260243550 0.0451985269 -0.0431018559 -0.0738301650 -0.0061540885 -0.0318877239 0.0036790701 -0.0317843943 0.0102478134 -0.0203555753 0.0718792973 0.0153896756 0.1366035900 -0.0257955510 0.0271768894 0.0679396080 -0.0011546408 0.0527683121 -0.0234119296 -0.0149042604 -0.0113372796 -0.0322889755 -0.0031431488 0.0850851403 -0.0319107458 -0.0601852838 -0.0430882866 -0.0236432027 0.2174178062 0.0496267497 -0.0303689481 0.0102374229 -0.0601447031 -0.0919033114 0.0471639775 0.0112908280 0.0192288180 0.0731431917 -0.0238734542 0.0879471222 -0.1126446823 0.0727635636 0.0839094998 0.0186648431 0.1099596689 0.1492486177 0.0111910700 0.0080550907 -0.0039228492 -0.0039849600 -0.0059461404 0.0082086535 0.0202731704 0.0227324407 0.0057749401 0.0194141425 0.0299867331 0.0104188724 -0.0093047324 0.0006888741 0.0020489308 -0.0249196008 0.0168208742 0.0192329375 -0.0115736046 0.0087747684 0.0113004976 0.0161942524 -0.0033971651 0.0030602530 0.0351132254 -0.0172572688 -0.0167383824 0.0555322437 -0.0027955481 0.0089271901 0.0405766667 -0.0034738489 0.0030975856 -0.0103501400 -0.0168569514 -0.0335138247 -0.0166801429 -0.0049572280 0.0411852454 0.0239847263 -0.0060739310 -0.0632019566 -0.0407744015 0.0100904664 0.0127919827 0.0601657327 0.0263345281 0.0438786792 0.0274547784 0.0451230173 0.0546938423 0.0768567336 0.0378110538 0.0660295498 -0.0788160927 0.0615104126 -0.0032479785 -0.0159886389 -0.0318855850 -0.0203299062 0.0286159568 -0.0154685611 0.0023626910 0.0199996861 0.0120457352 -0.0146486541 0.0102518442 -0.0070403003 0.0222328423 0.0626853995 -0.0345086460 0.1348914183 0.0146421209 0.1295564982 0.0420881009 -0.0458409914 0.0804716429 0.0565278135 0.0341268326 0.0178519027 -0.0193706106 0.0275409718 0.0359210635 -0.0076639812 -0.0393422570 -0.0789302704 -0.0077450768 0.0836048421 0.0123448287 -0.0426211977 0.0154122306 -0.0125126496 -0.0151365279 0.0288171599 -0.0210779214 -0.0252989989 -0.0091124915 -0.0915382581 -0.0053215204 0.0666659971 0.1437915709 -0.0160581251 -0.0336507625 0.0159307387 0.0169443248 -0.0099048911 0.0684847452 0.0394028940 -0.0074965327 0.0605454560 0.1498295247 -0.0146271671 0.0167866507 -0.0166603748 -0.0068122174 0.0239524449 0.0172393830 0.0331741857 -0.0031261776 0.0042496504 -0.0293052396 -0.0290735306 -0.0093627677 -0.0291043974 -0.0525029116 -0.0065321978 0.0554185042 -0.0038039697 -0.0087442911 -0.0108733265 0.0172760585 -0.0789765284 0.0327231292 -0.0499202315 0.1330658145 0.0432927800 -0.0929354472 0.0263100978 0.0026341788 -0.0405424848 -0.1415828099 -0.0231103762 0.0331273527 -0.0367646181 -0.0408605029 -0.0728784374 -0.0062429239 -0.0368675516 -0.0249911255 0.0290131874 0.0207460464 0.0005482268 0.0094816222 -0.0022149220 -0.0132798064 -0.0112393124 -0.0114331927 -0.0456212014 -0.0088367285 -0.0260704818 0.0015585720 0.0072469411 -0.0388331226 -0.0364100103 0.0034791953 0.0418075199 0.0498405675 -0.0017160164 0.0686284464 0.0357341860 0.0086356192 0.0517631400 0.0277483907 -0.0162878284 0.0218137325 0.0078925645 -0.0069378568 0.0030710645 0.0080145911 0.0027294521 -0.1500795326 0.0049950878 -0.0099884412 0.1404737738 -0.2397647602 0.0473439884 -0.1966329121 0.1029846514 -0.0692980219 -0.1254693620 -0.0929855121 0.0316107600 -0.0009243929 0.1113293230 -0.3391528121 -0.1399659085 -0.1084410929 0.1803463500 -0.0720412816 -0.0800849041 0.0078708896 -0.0327352664 0.1580315273 0.2083814022 -0.0736506087 -0.1255299746 -0.1074537963 -0.0215250372 0.0278663677 0.0224273832 -0.0079459523 -0.0428103020 -0.0191983302 -0.0183746305 0.0180496561 0.0218155458 0.0100026699 -0.0064309884 0.0021523659 -0.0130895380 -0.0057235011 0.0016114649 -0.0206477094 -0.0135883836 -0.0030117875 0.0164409388 0.0064459208 -0.0096253387 -0.0109094957 0.0139256973 0.0136615237 -0.0079554654 0.0052383904 0.0073637210 0.0186460261 0.0644646140 -0.0662368333 -0.0185414818 0.0620016303 -0.0419059938 0.0181007820 -0.0150411808 0.0040730913 -0.0390877342 0.0135073585 0.0042466849 0.0050353949 0.0459115232 -0.0208801046 -0.0204399654 0.0055004602 -0.0056089305 -0.0321365401 0.0006078341 0.0160353380 0.0283409755 -0.0069161420 0.0138699557 -0.0159089192 -0.0128416504 -0.0377258629 -0.0147170492 -0.0020297496 -0.0229818812 0.0285196525 -0.0960008320 0.0284815701 -0.0219546130 -0.0766903347 0.0078429325 0.0262903613 0.0353045529 0.0020596419 -0.0533571567 -0.0623035300 -0.0185831442 0.0101286586 -0.0782052831 -0.0215105915 -0.0108003953 -0.0059946419 -0.0184566414 -0.0006970569 0.0146270521 0.0166311152 -0.0259181381 0.0024566063 0.0300073927 0.0088408285 -0.0222373569 -0.0323514308 0.0124756316 0.0000579304 -0.0106281198 0.0019988819 0.0231965312 0.0049397933 -0.0185334865 0.0052665267 -0.0084889648 -0.0439614268 -0.0186880198 0.0027519025 0.0122642722 0.0332424381 0.0671440231 -0.0528932719 0.0306950995 0.0420710052 0.0052443130 0.0322210082 -0.0070065543 0.0301306808 -0.0133708263 0.0118358968 -0.0572147537 0.0073819499 -0.0798120771 0.0299604518 -0.0180866844 -0.0425702428 -0.0037800743 -0.0367989070 0.0145968091 0.0123953752 0.0062198285 0.0244069019 0.0069736809 -0.0591698958 0.0244417593 0.0492825152 0.0357415488 0.0209172100 -0.1598380824 -0.0298756177 0.0272132540 -0.0074602665 0.0462390199 0.0820381013 -0.0365104854 -0.0122762207 -0.0103388523 -0.0556942638 0.0170667125 -0.0672161193 0.0890092464 -0.0593007073 -0.0581392739 -0.0138299086 -0.0849550747 -0.1139011248 0.0187006420 0.0140250283 -0.0092252644 -0.0143097017 -0.0185208098 0.0186783217 0.0347465023 0.0379451406 0.0153077030 0.0419386901 0.0555664756 0.0163508313 -0.0229285345 0.0118375431 0.0038605025 -0.0592254646 0.0266706306 0.0348808326 -0.0037256454 0.0023633140 0.0135141143 0.0078102132 -0.0027917333 0.0177509090 0.0056425245 -0.0024237953 -0.0040288180 0.0152697773 -0.0159729781 -0.0075887758 0.0108162293 -0.0097771773 0.0065152127 -0.0041368565 -0.0028798035 -0.0096330832 -0.0069175039 0.0016637791 0.0107067030 0.0025288272 -0.0033720214 -0.0171467916 -0.0107984729 -0.0019754787 0.0036750358 0.0195547295 0.0167279680 0.0112121068 0.0076243813 0.0115373945 0.0152172140 0.0348854954 0.0155494565 0.0138929269 -0.0193886332 0.0157135246 -0.0008829462 -0.0030588344 -0.0120300372 -0.0105608825 0.0083635868 -0.0011130827 0.0030275791 0.0040104070 0.0018422560 -0.0074962912 0.0029092434 -0.0047540702 0.0126252117 -0.1090790787 0.1089966475 -0.0372671169 -0.0022727479 0.1244641002 0.0100392783 -0.0384065493 0.0710273146 0.0528201552 0.0218542933 0.0182044817 -0.0083719319 0.0437639287 0.0309757755 -0.0132162308 -0.0360617704 -0.0905845581 -0.0079870826 0.0430954776 -0.0091876965 -0.0352109850 0.0138962746 -0.0131069633 -0.0218101469 0.0352787216 -0.0318507542 -0.0547464016 0.0066079856 -0.1078766564 -0.0490804149 0.0438663699 0.0700475296 0.0031919937 -0.0000985844 0.0476457494 0.0336807543 -0.0310284657 0.0190044146 0.0134422587 -0.0565559315 0.0440226377 -0.0405616124 -0.0084288427 0.0073693582 -0.0023270734 -0.0011816349 0.0061289198 0.0057441544 -0.0032058901 0.0062318330 -0.0468766136 0.0150736348 -0.0174433871 0.0512374389 0.0031491067 -0.0269125008 0.0301155245 0.0112397801 0.0023714604 -0.0458545315 0.1290525436 -0.0392747614 0.2602291628 -0.1491894495 0.0630508002 -0.3001927231 -0.0946211611 -0.0076961120 -0.2418571310 0.1210451024 -0.0598871795 0.2149948100 -0.0120184946 0.0075905927 -0.0164519436 -0.0269230606 -0.0524725098 0.0020980980 -0.0360675700 -0.0115106682 -0.0676924879 0.0070674725 -0.0017123982 0.0036357326 -0.0014203812 0.0297836086 0.0060643211 0.0200930023 0.0489089314 0.0167037447 0.0431634834 0.0059393456 -0.0098524772 0.0341096424 0.0271099597 -0.0056475564 -0.0412505364 -0.0415824958 0.0077869113 -0.0682755912 -0.0279521334 -0.0074094483 -0.0496561713 -0.0242772979 0.0163935271 -0.0331408488 -0.0103948565 0.0091950657 -0.0044732168 -0.0113191549 -0.0046883801 0.1148755274 0.0187122952 -0.0034118017 -0.1214267469 0.2115188772 -0.0543155898 0.1869714890 -0.1080688450 0.0604478853 0.1279054947 0.1001036967 -0.0507931350 0.0055224167 -0.1262039472 0.3263001805 0.1378826877 0.0916206273 -0.1584596764 0.0684199094 0.0806585730 0.0002119488 0.0307247435 -0.1483032258 -0.1930365404 0.0709242511 0.1193848071 0.1030248108 0.0290746461 -0.0347014894 -0.0269222329 0.0116148600 0.0592582670 0.0284491364 0.0242077867 -0.0236173134 -0.0301100544 0.0069078765 0.0069637349 -0.0070090260 -0.0065797124 -0.0064889265 0.0080971945 -0.0071413676 -0.0108193467 0.0066595979 0.0077557911 0.0139188938 -0.0126274349 -0.0032819732 0.0001481479 0.0041171459 -0.0043988383 -0.0036801986 0.0038505059 0.0304201583 0.0674175648 -0.0609436681 0.0149172166 0.0615737245 -0.0515806554 0.0040312967 -0.0169985139 0.0109028309 -0.0023965806 0.0154467609 -0.0103985884 0.0113279906 0.0311572744 -0.0255606834 -0.0066717833 0.0044967882 -0.0031115830 -0.0089979288 0.0012113520 0.0037371963 0.0103525567 -0.0062180854 0.0054165106 -0.0055852539 -0.0014954220 -0.0106963528 -0.0064613615 0.0033434913 -0.0069812857 0.0165689979 -0.0431706617 0.0125784147 -0.0039816890 -0.0254351338 0.0024041462 0.0059410549 0.0142063395 -0.0013050409 -0.0099685249 -0.0324262702 -0.0002190542 0.0151523797 -0.0470659847 0.0010627516 -0.0030608238 0.0007525027 -0.0083618201 0.0001693466 0.0080793529 0.0033980079 -0.0074215636 0.0000829267 0.0093739431 0.0028501263 -0.0072666488 -0.0091947681 0.0046670680 -0.0000083655 -0.0036533050 0.0004330711 0.0095009691 -0.0013300473 -0.0058416217 0.0044784172 -0.0040881933 -0.0163084207 -0.0072897477 0.0020851742 0.0076251346 0.0138615601 0.0214572520 -0.0198952744 0.0084381888 0.0122575016 0.0020626406 0.0141018428 -0.0028008215 0.0127945417 -0.0067882548 0.0048591304 -0.0247873608 0.0055404538 -0.0286541794 0.0112298825 -0.0110920060 -0.0182019275 -0.0019832206 -0.0141470615 0.0070768667 0.0052646903 0.0026164758 0.0085123316 -0.0002260175 -0.0222124915 0.0101841025 0.0159304501 0.0143422943 0.0083314255 -0.0446260328 -0.0202254059 -0.0004691524 0.0053277161 0.0144711588 0.0223007197 -0.0108471297 -0.0062673122 -0.0043854152 -0.0178750232 0.0057071019 -0.0254691171 0.0169520132 -0.0134265103 -0.0095338694 -0.0133495189 -0.0241870545 -0.0351270979 -0.0421835969 -0.0248837137 0.0109193792 0.0062034885 -0.0049967968 -0.0088579482 -0.0760931465 -0.0857639712 -0.0046343989 -0.0362502730 -0.0511875453 -0.0090832513 0.0452606178 -0.0106015112 -0.0151518519 0.0317266239 -0.0286248900 -0.0121987256 0.0770699221 -0.0420042335 -0.0222814783 0.0089708809 -0.0141779093 -0.0046956676 -0.0069150349 0.0021298031 0.0027357136 -0.0191946174 0.0117681600 0.0030412729 -0.0118533447 0.0083202967 -0.0036099530 0.0004103181 0.0004225035 0.0045216292 0.0027730528 0.0002044446 -0.0065682132 -0.0015482011 0.0030770787 0.0058487665 0.0054290252 -0.0002509024 -0.0027753330 -0.0048756578 -0.0057504072 -0.0018971823 0.0003545808 -0.0028749543 -0.0042495254 -0.0127312893 -0.0031822813 -0.0003895537 0.0040916520 -0.0038955197 -0.0007638569 0.0047137107 0.0079972103 0.0060312689 -0.0023298592 -0.0023226281 -0.0011649048 -0.0007701418 0.0002642775 0.0028886649 -0.0006473436 0.0020889930 -0.0061603847 -0.0210368693 0.0013383355 -0.0404477356 0.0083588244 -0.0264389821 0.0115807607 0.0060887004 -0.0117508894 -0.0106410807 -0.0066056378 -0.0009639412 -0.0035708945 -0.0102193140 -0.0043362094 -0.0023827632 0.0060623227 0.0155405245 0.0018003912 -0.0035504177 -0.0004101192 0.0110714149 0.0000738737 0.0016088002 0.0078449161 0.0070915636 -0.0008348160 0.0318358779 -0.0072088706 0.0217206578 0.0003884414 -0.0216626926 -0.0040600174 -0.0226590744 0.0004821938 -0.0096244189 -0.0009935869 0.0087217659 -0.0016071916 0.0009422443 0.0316620191 -0.0223921558 0.0371668659 -0.0056025635 -0.0001404567 -0.0106050985 0.0036775006 -0.0019241908 0.0039149575 -0.0311947947 0.0049190175 -0.0583761573 0.0370826208 -0.0086865198 0.0801801221 0.0210216460 -0.0044895100 0.0423944116 -0.0264030608 0.0094379378 -0.0527329062 0.1615949783 -0.0629077442 0.4033758311 -0.2133841352 0.0973406389 -0.4645002036 -0.1502487341 0.0415451788 -0.3586702248 0.1454602038 -0.0422309682 0.3611990804 -0.0036035135 0.0021205341 -0.0178957680 0.0042854614 0.0082993592 -0.0013094578 0.0077102117 0.0041412736 0.0215915927 -0.0023634309 0.0023802812 -0.0014441091 0.0013420057 -0.0173655097 -0.0047708840 -0.0081832347 -0.0318393004 -0.0096390153 -0.0282877561 -0.0044098109 0.0052366335 -0.0233445618 -0.0098605035 -0.0044147255 0.0268596634 0.0277581244 0.0065379457 0.0436177267 0.0089066513 0.0051831176 0.0354695610 0.0043903331 0.0005447725 0.0200574084 0.0059417413 -0.0051863704 0.0031270140 0.0074036568 0.0033902705 -0.1000463385 0.0224827064 -0.0157502128 0.0968626832 -0.1579094429 0.0195541239 -0.0917195228 0.0275306544 -0.0465923833 -0.0813058324 -0.0690262819 0.0702339749 0.0012293525 0.0713390491 -0.1689231035 -0.0905166224 -0.0311893442 0.0732515600 -0.0413310309 -0.0794038868 -0.0549807159 -0.0257528070 0.1081400920 0.1046683233 -0.0531713677 -0.0232204242 -0.0300113792 -0.0152439441 0.0218436930 0.0174874232 -0.0069695354 -0.0372930091 -0.0162654899 -0.0182366324 0.0167885176 0.0224660388 -0.0020717811 -0.0026443577 0.0018965279 0.0053315958 0.0101920125 -0.0020532426 0.0061992434 0.0097124711 -0.0007675713 -0.0061570780 -0.0072386152 0.0065919613 0.0003360398 -0.0074207347 -0.0033172601 -0.0019643917 -0.0036909749 -0.0034697337 -0.0284228327 -0.0509488068 0.0543488100 -0.0041513935 -0.0461503993 0.0376038698 0.0058929794 0.0109715565 -0.0046740003 0.0170922489 0.0123165372 -0.0172188246 -0.0032210675 0.0027542323 -0.0055368823 0.0014779373 -0.0022242945 0.0009107565 0.0011831708 -0.0002044736 -0.0007071143 -0.0030651901 0.0029865138 -0.0017274261 0.0020084031 -0.0013824070 0.0026909643 0.0026580282 -0.0030320086 0.0021826511 -0.0052807996 0.0109851219 -0.0034282431 0.0008546789 0.0039362590 0.0000931183 -0.0002946285 -0.0042299888 0.0011744770 -0.0033647032 0.0189234612 -0.0035744232 -0.0101586123 0.0238951796 -0.0038491993 -0.0004888815 -0.0048696000 -0.0004268115 -0.0010358826 -0.0016047947 0.0025111153 0.0012297030 0.0003017315 -0.0019625507 -0.0005951505 0.0017269613 0.0015049085 -0.0050124154 0.0005461556 0.0013266322 -0.0010630337 -0.0080636959 0.0034308015 0.0058087086 -0.0022352494 0.0016396935 0.0144470589 0.0060418850 -0.0033108398 -0.0021508668 -0.0058517147 -0.0093396481 0.0187680049 -0.0062905620 -0.0071849387 -0.0005815556 -0.0134786912 0.0033692771 -0.0090680436 0.0055806715 -0.0021993347 0.0195940411 -0.0105073429 0.0142693722 -0.0084362553 0.0070156243 0.0075716328 -0.0001492992 0.0043644933 -0.0015070141 -0.0015800757 -0.0006523306 -0.0020688968 -0.0004499002 0.0064046340 -0.0024083034 -0.0050032154 -0.0038562824 -0.0018759824 0.0182942577 0.0030690301 -0.0027107177 0.0007472036 -0.0054672104 -0.0072383276 0.0036539757 0.0016209335 0.0002823369 0.0054686084 -0.0018912697 0.0061514007 -0.0097124534 0.0067219364 0.0054086889 -0.0006664811 0.0083566839 0.0118250079 0.0240663134 0.0187068605 -0.0073334550 -0.0000438499 0.0022154402 0.0078104834 0.0383286909 0.0418802429 0.0023935432 0.0229479501 0.0385863818 0.0071364253 -0.0257208691 0.0042451607 0.0094588355 -0.0184894027 0.0179868223 0.0092992481 -0.0507274015 0.0309977410 0.0168488860 0.0023652889 0.0083969320 -0.0009958997 0.0180623573 -0.0117666511 -0.0071264146 -0.0080694686 0.0627316185 0.0209537808 0.0025761645 0.0444879204 -0.0208524347 -0.0024031614 -0.0190516329 0.0010132342 0.0010144965 -0.0150537277 0.0196258075 -0.0057172188 0.0262447280 -0.0006988650 0.0043529476 0.0075064918 -0.0083338995 0.0073662995 -0.0445552577 0.0175980181 0.0311376912 0.0082900608 0.0029079437 -0.1090268861 0.0219478995 0.0822048458 -0.0126299407 0.0060524725 -0.0129404679 -0.0174493623 -0.0164203134 -0.0075680746 0.0043631178 0.0032109759 0.0027771683 0.0042446665 0.0026657581 -0.0029516507 0.0056125376 -0.0030731123 0.0049474323 0.0109990712 -0.0246269543 -0.0127880019 -0.1558536047 0.0874645805 -0.2559404034 0.0179341896 -0.0136420453 0.0327414103 0.0373949553 -0.0246001026 0.0507705321 0.0450457803 -0.0259994807 0.0830871255 -0.0078848546 0.0130220957 -0.0178010642 -0.0449466429 0.0409890682 -0.0867034681 -0.0381046695 0.0191245199 -0.0626842631 -0.2577373059 0.1326886278 -0.4244213237 0.0990447293 -0.0462998280 0.1825668314 0.2838605646 -0.1366306213 0.4109691509 -0.0141469193 -0.0086163470 -0.0118600493 0.0043578058 0.0251334899 0.0069199258 -0.0016481684 0.0275001095 0.0435245305 -0.0022378576 0.0053354139 -0.0004128502 -0.0020137993 0.0077799320 0.0031870815 0.0034572489 -0.0015775794 -0.0043384708 -0.0068334795 -0.0101534446 0.0040995933 -0.0062112071 -0.0163391241 0.0028338369 0.0118325507 0.0002335683 -0.0068842692 0.0090940170 -0.0023484690 0.0146347800 -0.0143413979 -0.0109252859 -0.0105570394 0.0024608228 -0.0256476641 -0.0229830553 0.0162000713 -0.0135234748 0.0023564352 -0.0014562191 0.0106952954 -0.0054917345 0.0027812883 -0.0040795586 0.0116050814 0.0123099597 -0.0527130281 0.0744061485 -0.0115978975 0.0417667887 -0.0073794481 -0.0015802769 0.0166245348 0.0010660552 0.0050004049 0.0123766963 0.0084104263 0.0189673179 0.0051053816 -0.0030022411 -0.0084203350 -0.0005445075 -0.0012012541 0.0035312952 0.0010460097 0.0005031848 0.0035241623 -0.0027550540 -0.0000747504 0.0020443806 -0.0020455549 0.0016833523 -0.0107621720 -0.0032512087 0.0019637142 -0.0011782657 -0.0048740997 -0.0025632298 -0.0071110341 -0.0016683394 0.0003343933 0.0110004959 -0.0189340187 0.0023381353 -0.0073414476 0.0025993865 -0.0027303235 -0.0055673782 -0.0068501924 0.0156960760 -0.0012848489 0.0091587396 -0.0080423504 -0.0069575631 0.0071202604 -0.0054239898 -0.0022857236 -0.0088641605 -0.0113616734 -0.0029540057 0.0075356794 0.0019190539 -0.0047112136 0.0090235018 0.0051123182 0.0090674258 -0.0121703235 -0.0094700067 0.0044132104 0.0182114842 0.0085767732 0.0085880933 -0.0105183711 -0.0113418400 -0.0032876719 -0.0165368644 0.0131570659 0.0015732810 0.0143590725 -0.0127719115 -0.0024839646 0.0092291635 -0.0122480358 -0.0017013755 -0.0260764688 0.0203445339 -0.0003067513 0.0187687164 -0.0056154751 0.0029604245 0.0172911904 -0.0112838651 -0.0489269290 -0.0757686739 0.0686655904 -0.0318984824 -0.0546878679 0.0496512503 0.0138960788 0.0202653528 -0.0162294912 -0.0479291036 -0.0665457900 0.0614196247 -0.0507344702 -0.0801712496 0.0820629733 0.0129484302 -0.0453422784 0.0034242016 0.0005100504 -0.0329263198 0.0087813847 -0.0139492653 0.0524533692 -0.0089089957 0.0020132292 -0.0193329263 -0.0014209259 0.0037682453 -0.0263757705 0.0067373546 -0.1394222279 0.2183934974 -0.0794529286 -0.1038749871 0.1682258345 -0.0601828115 0.0342327343 -0.0285271652 0.0267371839 -0.0629064498 0.0786443763 -0.0278819753 -0.0771481653 0.1135844905 -0.0416736073 -0.0051000752 -0.0099897053 -0.0042648451 -0.0022988502 -0.0005544976 0.0114951691 -0.0212201865 0.0125975247 0.0097799008 0.0056329554 -0.0002452836 -0.0258213670 -0.0067391988 0.0025723534 -0.0021625123 -0.0034108400 -0.0140854368 0.0135543648 0.0038085250 -0.0079348543 0.0035370865 0.0147291341 0.0078662248 -0.0064247071 -0.0067735765 -0.0081276808 0.0012871269 0.0188462177 0.0020007810 -0.0020161486 0.0021014896 -0.0242195992 0.0059671326 -0.0108697930 0.0109877916 -0.0027502393 0.0369158542 -0.0255267926 0.0084336544 -0.0042216009 0.0210858080 0.0040700248 -0.0059887356 0.0151197767 -0.0042210022 -0.0040028954 -0.0017392989 -0.0015230634 0.0113317823 0.0146781773 -0.0110458628 -0.0001049995 -0.0148225190 -0.0075288847 -0.0189207789 0.0451409925 0.0385960393 -0.0510791032 0.0057986540 0.0319441777 -0.0026269042 0.0119174028 -0.0004598038 0.0025366731 -0.0032351731 0.0124294889 0.0349645833 -0.0152207338 -0.0378594245 0.0109874465 -0.0045079885 0.0075598796 -0.0213481833 -0.0124915659 0.0007477107 -0.0107241520 -0.0208848189 0.0058769548 -0.0374848363 -0.0449278992 0.0052078367 -0.0011189899 -0.0129214228 -0.0035766716 0.0178557430 0.0020291260 -0.0080945999 -0.0046653332 -0.0059934234 0.0047874288 0.0569910920 -0.0375309754 -0.0164163505 -0.0033008381 -0.0119455584 0.0136799962 -0.0275312584 0.0178865164 0.0086814826 0.0119690607 -0.0913162993 -0.0318375467 -0.0040383185 -0.0641673368 0.0305204706 0.0022969589 0.0269104386 -0.0004735733 -0.0010639898 0.0239500204 -0.0274864949 0.0049487488 -0.0371090485 0.0089105656 -0.0036782218 -0.0117886650 0.0132825958 -0.0205419041 0.0613333821 -0.0307456682 -0.0465797257 -0.0178179963 -0.0125260485 0.1591699768 -0.0479996942 -0.1409395335 0.0337585398 -0.0205692952 0.0193186696 0.0251581482 0.0228019069 0.0100187206 -0.0134611380 0.0030342450 -0.0043693280 -0.0087577609 -0.0067512111 0.0068170145 -0.0029581213 0.0041217000 -0.0116999020 0.0056911960 -0.0105955631 -0.0123774213 -0.1206083791 0.0648643440 -0.2046724431 0.0160980266 -0.0144239433 0.0218218486 0.0275690662 -0.0215107071 0.0444047316 0.0365517094 -0.0231398580 0.0667654772 -0.0019076214 0.0105912118 -0.0109886179 -0.0469576822 0.0287005699 -0.0678294440 -0.0303009864 0.0178616004 -0.0515132586 -0.2078933132 0.1004653996 -0.3454009791 0.0782061989 -0.0336917228 0.1317938753 0.2252524441 -0.1300932284 0.3399090670 -0.0094379186 -0.0009202703 -0.0118791659 0.0032870439 0.0102907807 0.0058599192 -0.0077788343 0.0190527621 0.0052073505 -0.0018383426 0.0024236202 -0.0022208219 -0.0003401702 0.0028880467 0.0014419996 0.0005590919 -0.0006260971 -0.0029335575 -0.0014209692 -0.0045502273 0.0050681698 -0.0020297824 -0.0067953965 0.0023444776 0.0043014283 0.0003674576 -0.0052471430 0.0077370024 -0.0024109936 0.0193079617 -0.0144791881 -0.0035554697 -0.0227835285 -0.0067761439 -0.0073931461 -0.0195089756 0.0121962726 -0.0066097023 0.0131885187 -0.0004806683 0.0040519913 -0.0026034378 0.0078557201 0.0014120994 0.0121259087 0.0103345943 -0.0280992265 0.0025159122 0.0162833487 -0.0568745224 0.0104406872 0.0022483673 -0.0212414207 -0.0004241658 -0.0066270524 -0.0206074931 -0.0099649182 -0.0269206730 -0.0062529898 0.0039353014 0.0057835430 -0.0025948253 0.0027717406 0.0005757392 0.0038805744 -0.0018206466 0.0034460909 0.0056880081 -0.0003399355 0.0029963872 0.0047594493 -0.0036124636 0.0166582943 0.0048541447 -0.0037120645 0.0021925127 0.0068130654 0.0031379415 -0.0041342642 -0.0005435400 0.0002748199 0.0017580885 -0.0039385670 0.0035970240 -0.0136747937 0.0105325030 -0.0037323177 -0.0062241441 -0.0025265150 -0.0132607656 0.0020333679 0.0029298377 -0.0188475270 -0.0056808743 -0.0125232993 0.0169126426 -0.0046954235 0.0010741630 0.0121744203 0.0001333692 0.0070029363 0.0181517878 -0.0020938765 -0.0227121794 -0.0165369367 -0.0138503429 0.0186264266 0.0145439136 -0.0062483307 -0.0294728897 -0.0137113233 -0.0131643713 0.0150045336 0.0168397805 0.0038636349 0.0233844266 -0.0178039379 -0.0033366747 -0.0231740458 0.0208853583 0.0039532409 -0.0163137462 0.0210935129 0.0016450371 0.0366775634 -0.0276726600 0.0018874191 -0.0235874696 0.0044685678 -0.0024042554 -0.0221777048 0.0134238505 0.0772646009 0.1297304501 -0.1191051528 0.0595743633 0.0976033831 -0.0923936193 -0.0201994717 -0.0270483095 0.0224081349 0.0603671360 0.0725353139 -0.0693516963 0.0637385755 0.0940693364 -0.1002298933 -0.0108634234 0.0513673137 -0.0085909475 0.0076213870 0.0362845260 -0.0165012192 0.0157209915 -0.0714558295 0.0103953956 -0.0054380168 0.0359699607 0.0096267264 -0.0144266596 0.0477368889 -0.0035687102 0.1540326642 -0.2356618016 0.0811268871 0.1236590016 -0.1664408343 0.0653401479 -0.0424947010 0.0420219835 -0.0372630148 0.1197444472 -0.1548888684 0.0620631175 0.1348627798 -0.2276011511 0.0817481596 0.0079412710 0.0140286939 0.0069184027 0.0029447715 -0.0000210141 -0.0171172552 0.0267781771 -0.0160705531 -0.0108241185 -0.0069802447 -0.0024683715 0.0343182713 0.0098019362 -0.0035687403 0.0035233745 0.0040437119 0.0194738570 -0.0196298634 -0.0048978844 0.0125031968 -0.0064309128 -0.0211110984 -0.0112468379 0.0088612849 0.0115210754 0.0145523635 0.0010936238 -0.0261804211 -0.0025906037 0.0051177187 -0.0024295183 0.0344994177 -0.0076890335 0.0163194536 -0.0162011777 0.0045146545 -0.0531142086 0.0350374147 -0.0147628959 0.0064712926 -0.0316127838 -0.0089717609 0.0142215754 -0.0192127518 0.0014758293 0.0010170078 0.0030460318 0.0004550700 -0.0206208874 -0.0114170377 0.0145363124 -0.0086268950 0.0170697384 0.0089883438 0.0621551742 -0.0668807366 -0.0668531020 0.0897686994 -0.0222124557 -0.0674370312 0.0116043466 -0.0165164941 -0.0006413305 0.0047025180 0.0020433435 -0.0091232795 -0.0761868975 0.0377454222 0.0701376139 -0.0208049878 0.0215800868 0.0091493240 0.0277688124 0.0154691438 -0.0068396661 -0.0035265670 0.0063793422 0.0028429900 0.0486837839 0.0544259017 -0.0046971888 0.0104094561 0.0234606802 0.0022010820 -0.0265812675 0.0016696438 0.0107164375 -0.0015219071 0.0151832239 -0.0019295992 -0.0650593125 0.0394890774 0.0180596123 0.0053962460 0.0077345650 -0.0037052996 -0.0065273107 0.0033113188 0.0019868447 0.0043247847 -0.0126959971 0.0079042292 -0.0023881875 -0.0134939304 0.0037449098 0.0042173053 0.0092250648 -0.0027978466 0.0045190408 0.0075169558 -0.0080479099 0.0115388187 -0.0129541323 0.0038498456 -0.0021732343 0.0058998700 0.0067974905 -0.0190542402 0.0138325437 -0.0137640890 -0.0240252049 -0.0057991425 -0.0066267770 0.0613805949 -0.0423904707 -0.0740925353 0.0140550628 -0.0093782528 0.0080256091 0.0085574208 0.0145862355 0.0097991028 -0.0077267379 -0.0033747844 -0.0030939364 -0.0053097976 -0.0013267209 0.0091268416 -0.0002013459 0.0057246653 -0.0127860586 0.0367204169 -0.1053131877 -0.0355371186 0.0135591874 -0.0474712562 0.0160852335 0.0111170686 -0.0245438280 -0.0196398122 -0.0059020108 -0.0088541250 -0.0212874851 -0.0403774056 -0.0078169696 0.0110563185 0.0181861454 0.0545862800 0.0084459791 0.0199915797 0.0242783558 0.0116622661 -0.0031344399 0.0043053429 0.0200767475 -0.0185682461 0.0177549430 0.0655855519 -0.0369010201 0.0799715303 0.0316332357 -0.0057576539 0.0540742033 -0.0265359239 -0.0075991698 -0.0757450363 -0.0057052841 0.0200555370 0.0697475042 -0.0067040241 0.0535965246 0.0294289732 0.2152494085 -0.0001212136 0.0124169772 0.0084957538 -0.0045199383 0.0205735480 0.0066066435 -0.0004102253 -0.0069026137 -0.0112035181 -0.0165220008 -0.0239928273 0.0094392867 -0.0138814980 -0.0374869149 0.0075439030 0.0231146442 0.0025114143 -0.0128331529 0.0131686753 -0.0090794368 0.0357670290 -0.0351561586 -0.0343955596 -0.0290144605 0.0043924052 -0.0587321382 -0.0566706797 0.0352103708 -0.0220325239 0.0143521698 0.0010720225 0.0303043354 -0.0156100672 0.0032168839 0.0057271164 -0.0035633831 0.0091248723 0.0050722824 0.0245328371 0.0090390313 -0.0317076062 0.0054927902 -0.0147146541 0.1227709612 -0.0007836774 0.0353404171 0.0901468717 0.0557508909 0.1415858072 0.0393758806 -0.0223718021 -0.0643976744 -0.0348844079 0.0198020921 0.0279710589 0.0192258081 -0.0237761026 0.0394326701 0.0177890089 -0.0097981335 0.0152154653 0.0182778586 -0.0212246427 -0.0811732011 -0.0230575922 0.0165161093 -0.0100487013 -0.0359387724 -0.0178854231 -0.0273029063 -0.0807526749 0.0387523237 0.0568314437 -0.1200728304 0.0545604141 -0.1467485878 0.1116742387 -0.0306710665 -0.0649765878 -0.0486331500 0.0045729835 -0.0027026692 0.0796032971 -0.1818072611 -0.0742368122 -0.0219913287 0.0505584148 -0.0373202520 -0.0105174171 0.0566835985 -0.0100154184 0.0455888833 0.0990926905 -0.0265055160 -0.1032416236 -0.0801291946 0.0677152027 -0.0904677450 -0.0696040318 0.0319648342 0.1392542139 0.0665038148 0.0631042625 -0.0747797476 -0.0832219600 -0.0043369724 -0.0040518522 0.0040559641 0.0037406870 0.0065473812 -0.0016517333 0.0055952911 0.0081471758 -0.0011111609 -0.0036027967 -0.0054081984 0.0047336997 0.0005196066 -0.0063685690 -0.0026899132 -0.0015479014 -0.0030996869 -0.0027662556 -0.0189283798 -0.0356899787 0.0378706874 -0.0079650369 -0.0388012915 0.0363915132 0.0035621215 0.0065415684 -0.0037227559 0.0129151918 0.0082284680 -0.0131847670 0.0002105425 0.0054183251 -0.0087022015 -0.0066933583 0.0264246022 -0.0012559230 0.0012220187 0.0213841686 -0.0076223092 0.0069491782 -0.0345791790 0.0046441135 -0.0015291373 0.0166293557 0.0036587792 -0.0040896318 0.0205602215 -0.0024017321 0.0767000634 -0.1188392992 0.0442989899 0.0687344820 -0.1020161041 0.0385209417 -0.0221462138 0.0177285905 -0.0177603319 0.0571054550 -0.0671734855 0.0262129532 0.0565458595 -0.0854975969 0.0339528548 -0.0007167157 -0.0026883753 -0.0003608567 -0.0004279176 -0.0006357415 0.0019701366 0.0148482725 -0.0083416029 -0.0072165282 -0.0041926647 0.0007181901 0.0185727695 0.0015048122 -0.0021378750 0.0026404341 0.0029077053 0.0037343595 -0.0030820560 -0.0006898222 -0.0012881415 0.0006588355 -0.0004613416 -0.0007419653 0.0006965609 -0.0033125944 -0.0025493814 -0.0024273296 -0.0003748987 -0.0003401130 0.0017016566 -0.0024728587 0.0054181879 -0.0014461118 -0.0020087389 -0.0007553639 -0.0005814300 -0.0079638690 0.0076743665 0.0028261075 -0.0045343829 -0.0035615779 0.0069763596 0.0100885161 -0.0024060258 -0.0051766892 -0.0030804363 -0.0016041924 -0.0035911256 -0.0074987920 0.0058293554 0.0011533355 -0.0102251732 0.0002198310 0.0000237152 0.0388885109 -0.0135929500 -0.0216358447 0.0370017860 -0.0175528191 -0.0380356148 0.0081963547 -0.0032716594 0.0021781719 0.0078959450 -0.0006473724 0.0085852292 -0.0295496005 0.0171974349 0.0280872671 0.0077370790 0.0142315154 0.0124077282 -0.1579896874 -0.0827662926 0.0204900306 -0.0167630586 -0.1003725648 0.0209562475 -0.2853410205 -0.3335307492 0.0462642513 0.0014894030 -0.0879694503 -0.0139463211 0.1370523825 0.0063616659 -0.0620874462 -0.0296975021 -0.0763754150 0.0227536121 0.3872406772 -0.2353252941 -0.1001302747 -0.0088396980 -0.0695177316 0.0650217500 0.0502976089 -0.0304897641 -0.0238017295 0.0788833047 0.0706825938 0.0782532807 0.0502527801 0.0306342445 -0.0287762288 -0.0139165216 -0.0009843653 -0.0306091721 -0.0082274933 0.0027620995 0.0461204734 0.0420228319 -0.0007130324 -0.0241524391 -0.0267213352 0.0481032803 0.0089295099 -0.0489093368 -0.0125928398 0.0031714607 -0.0196530990 0.0166833847 0.0000458233 0.1268704023 -0.1649166202 -0.1748285597 -0.0026479393 -0.0008643182 0.0164777555 -0.0282341985 -0.0406246133 -0.0195484708 0.0025459754 0.0125918945 0.0066292824 0.0066622618 0.0019826772 -0.0034851391 -0.0010638409 -0.0013379659 0.0024385830 -0.0264383195 0.0420256687 0.0011281504 0.0002509848 0.0114937395 0.0013221889 -0.0037602001 0.0071059614 0.0043328433 0.0002596245 0.0039008442 0.0040957725 0.0133116188 0.0017017679 -0.0044798576 -0.0053407429 -0.0175711277 -0.0015820135 -0.0066931315 -0.0086531927 -0.0026309811 0.0025567827 -0.0021709873 -0.0033000067 0.0053051458 -0.0069869023 -0.0241787787 0.0091735893 -0.0241088410 -0.0127441630 0.0001959272 -0.0181411999 0.0072540133 0.0042201018 0.0228835547 0.0047903216 -0.0067876903 -0.0229142455 -0.0012624484 -0.0072549308 -0.0194109352 -0.0578180252 0.0017452259 -0.0049573890 -0.0000080397 0.0012796843 -0.0064604855 -0.0016382518 -0.0015025130 0.0030121682 -0.0004637512 0.0059796478 0.0076694908 -0.0015728122 0.0062646596 0.0120819118 0.0006534608 -0.0096494005 -0.0003943139 0.0029208735 0.0051571016 -0.0005496978 0.0072313825 0.0039376018 0.0186766931 -0.0062130392 -0.0039945165 0.0182080787 -0.0043491521 -0.0062325112 0.0042778951 0.0119560032 -0.0026626945 -0.0086231497 -0.0000944484 -0.0010528194 0.0006516101 0.0010715901 -0.0037709277 -0.0097934834 -0.0015300256 0.0330112766 -0.0557221690 0.0165321067 0.0014613139 -0.0107707909 0.0020762734 -0.0030238323 -0.0030647690 -0.0043577847 -0.0121142518 -0.0027404595 0.0004541281 0.0155645055 -0.0087666301 0.0072002258 -0.0103988951 -0.0003654746 -0.0038424105 -0.0160509083 0.0115634399 -0.0020192532 -0.0102488675 0.0098528956 -0.0081147100 0.0063179710 0.0014286982 -0.0011424489 0.0008104262 0.0022145751 0.0012151071 0.0158002483 -0.0001560525 0.0008221710 -0.0300758479 0.0474205562 -0.0040187738 0.0069853978 0.0097454506 0.0103342089 0.0411304259 0.0408763038 -0.0887461700 0.0069701845 -0.0445542510 0.0433399924 0.0346418159 -0.0185855682 0.0084359820 0.0071195493 0.0411260637 0.0578440786 0.0112893073 -0.0327227200 -0.0024141129 0.0209754513 -0.0379199125 -0.0215435654 -0.0041620293 0.0051825157 0.0039713535 -0.0021659371 -0.0105657059 -0.0048398469 -0.0040337816 0.0048108611 0.0055748776 -0.0228645352 -0.0764798427 0.0628362640 0.0105257806 0.0594675932 -0.0434228490 -0.0015734138 0.0420086874 -0.0400584021 -0.0055181064 -0.0796383023 0.0621000968 -0.0011208162 0.0488090915 -0.0211935629 0.0053193724 0.0483506451 -0.0451646917 -0.1736981163 -0.2719268761 0.2577672221 -0.1280579999 -0.2477036922 0.2335855766 0.0488879830 0.0566528578 -0.0487079938 -0.1385331604 -0.2151364946 0.1891463235 -0.1511770886 -0.2250921818 0.2215901046 -0.0211276805 0.0402466131 -0.0079698435 -0.0112584929 0.0247855739 -0.0069398620 0.0229720704 -0.0468252515 0.0107241602 -0.0099199008 0.0219112575 -0.0066261424 -0.0207602449 0.0335171237 -0.0028312462 0.1066393175 -0.2063863661 0.0710165973 0.0799353258 -0.1789962254 0.0455192146 -0.0118961996 0.0397585350 -0.0187827990 0.0798710560 -0.1478518333 0.0418732548 0.0835862650 -0.1683913761 0.0533870049 -0.0190361875 -0.0328388485 -0.0200546838 -0.0062543549 0.0033257420 0.0414848044 0.0030946160 -0.0068796267 0.0090080509 -0.0001129414 -0.0112455042 0.0034936411 0.0115016453 -0.0016034537 0.0042978778 -0.0026368099 0.0064537668 0.0081966776 -0.0144747350 -0.0118303069 -0.0016264695 -0.0249622355 -0.0059041156 -0.0020330699 -0.0136554710 0.0038921384 0.0414938256 -0.0315449729 0.0412539524 0.0421394728 0.0051720435 0.0079986570 0.0005275040 0.0111216435 -0.0009645476 0.0013394693 -0.0077342350 -0.0049020971 -0.0351295031 0.0199063154 0.0114143743 -0.0138888188 0.0365908086 -0.0016616570 -0.0348911176 -0.0207730453 -0.0093470739 -0.0000063567 -0.0177496812 0.0331884096 0.0044696418 -0.0248020482 -0.0024469391 0.0047944250 0.1287266068 -0.0132842477 -0.0401515146 0.1138072817 -0.0683736013 -0.0838085054 0.0246882333 -0.0099331974 -0.0007597158 0.0181157055 -0.0029632346 0.0197875921 -0.0877862439 0.0537770564 0.0808655398 0.0008527869 0.0378204785 0.0389596409 0.0143501245 0.0069106387 -0.0001008144 0.0060265163 0.0163899774 -0.0065292898 0.0255811330 0.0308772295 -0.0091488135 -0.0088573946 -0.0012880232 -0.0016612989 -0.0109064860 -0.0012002655 0.0063291664 0.0122266016 -0.0006887970 -0.0096900557 -0.0406717960 0.0243292396 0.0063181786 -0.0005332694 0.0081776453 -0.0081468800 0.0054522513 -0.0107355374 -0.0039456923 -0.0237751969 -0.0302655031 -0.0909425903 0.0004139967 0.0078628936 0.0107299051 -0.0051827429 -0.0062415909 0.0016953596 0.0009428004 -0.0052659329 0.0040075349 0.0160813424 -0.0059258626 -0.0144733696 -0.0259470122 0.0154500050 0.0205724075 -0.0149905067 -0.0009680186 0.0168807096 0.0088619622 0.0021962869 -0.0017668861 0.1420026246 -0.1134790897 -0.1052338778 -0.0116948121 0.0063967218 -0.0002632216 0.0057552412 0.0010801310 -0.0006446999 0.0003612072 -0.0035436197 0.0009641332 0.0054157568 0.0027455076 -0.0008733488 0.0014963068 -0.0003856462 -0.0017494877 0.0552447110 -0.0779804110 0.0119645846 0.0059658773 -0.0074075406 0.0125267235 -0.0009473259 -0.0020348493 -0.0021530409 0.0031949525 -0.0050144270 -0.0122126984 -0.0182308247 0.0017862419 0.0049248218 0.0051309249 0.0192656291 0.0037132961 0.0230604559 0.0154360627 0.0010673797 -0.0014909923 -0.0024822971 0.0074956540 -0.0028009368 0.0071667321 0.0383776021 -0.0226471258 0.0324834040 0.0128804347 0.0013806699 0.0568496866 -0.0227628525 -0.0081022693 -0.0371552203 -0.0088972295 0.0097097721 0.0505379060 0.0078601635 -0.0125001875 0.0652406156 0.0838508076 -0.0042748908 0.0118364000 -0.0004273915 -0.0035346140 0.0134061814 0.0024765969 0.0068678153 -0.0054682914 0.0033293822 -0.0168049877 -0.0167416646 -0.0018750707 -0.0142594587 -0.0283794631 -0.0028559856 0.0226472424 -0.0006292134 -0.0051121969 -0.0139352292 0.0041056483 -0.0341024830 0.0037250822 -0.0363650729 0.0444983063 0.0270117241 -0.0507247588 0.0205244206 0.0093363859 -0.0131336031 -0.0391412671 0.0079713517 0.0168958758 0.0067832265 -0.0044346658 -0.0047545248 -0.0030917674 0.0000183208 -0.0071840631 0.0124569056 -0.0019025161 0.0131699992 -0.0021035010 -0.0003363275 -0.0075078009 -0.0038524669 0.0006081976 -0.0145217639 -0.0033136287 -0.0017451527 -0.0080379031 0.0047184008 -0.0293100088 0.0864086170 -0.0276173704 0.0249936909 -0.0396999462 0.0063006219 0.0342284319 -0.0949157812 0.0018183476 0.0178941126 -0.0695115176 0.0437505367 0.0012011775 0.0023029053 0.0001384663 0.0003675080 0.0035775203 0.0014696881 0.0744522417 -0.0587132147 0.0305992856 0.0253538488 -0.0371871083 0.0177599312 0.0827983631 -0.0681418033 0.0169076021 -0.0962379368 -0.1320655123 0.4634176416 -0.0362695898 0.1498314532 0.0224486296 -0.0735548501 0.1956356266 -0.2025311671 0.0090350888 -0.1589343120 -0.2973240563 -0.0297867344 0.0478574168 -0.1265597804 -0.0519860646 0.2468883987 0.1599221529 -0.0072355705 0.0100303284 0.0072303907 -0.0016249853 -0.0025179295 -0.0020633963 -0.0055735517 0.0050700551 0.0070715740 0.0059870802 -0.0008281576 -0.0018548925 -0.0020190475 0.0013071062 0.0025870940 -0.0043494598 -0.0026998881 0.0001500670 0.0036953964 0.0011927144 -0.0027475287 -0.0043781541 0.0043837941 0.0025087564 -0.0023367576 0.0027436930 0.0003402850 0.0008265309 0.0109223578 -0.0073180584 -0.0013084501 0.0161810850 -0.0123412910 0.0080101023 -0.0019953243 -0.0016312494 -0.0168666830 -0.0007091341 0.0033021408 -0.0067030058 0.0004433572 0.0060237641 -0.0006424279 -0.0079531404 -0.0019674265 -0.0037031199 -0.0048233352 -0.0008304379 -0.0008537306 0.0086325705 -0.0016865915 0.0011850000 -0.0054795704 0.0018449990 -0.0009868357 -0.0080209191 0.0064367828 -0.0188666193 0.0173009695 -0.0098571924 -0.0156613479 0.0127002495 -0.0104120843 0.0115084132 -0.0017986823 0.0071275025 -0.0177165804 0.0366349128 -0.0102917655 -0.0256875759 0.0312458958 -0.0091839422 -0.0043222170 -0.0030462329 -0.0070631099 0.0003311860 0.0049781295 0.0077495119 -0.0078507697 0.0035451683 0.0070274531 0.0025797630 -0.0027897545 -0.0103110991 0.0001456408 0.0071856764 0.0086221161 -0.0062512854 -0.0082607006 -0.0141747564 -0.0024118609 -0.0034909730 -0.0220415009 -0.0023733764 -0.0031759940 -0.0096122040 0.0229119225 0.0501883313 0.1127469570 0.0081638163 0.0214996909 0.0530774105 0.0050951597 0.0053303588 0.0187554763 0.0074913840 0.0042859806 0.0181754606 -0.0252651751 -0.0401198089 -0.1029161195 -0.0138013187 -0.0413570071 -0.1147355976 0.0503099399 -0.0224433569 -0.0308826351 -0.0307892665 0.0169932669 0.0200487457 -0.0405075442 0.0233367358 0.0234384745 -0.0294024153 0.0071338904 0.0144425034 0.1990779227 -0.0821102551 -0.1051882049 0.1846477915 -0.0976679299 -0.1198788981 0.0389999938 -0.0147151575 -0.0280795377 0.0164195100 -0.0073022182 -0.0074228013 -0.1900152871 0.1083751480 0.1188735662 -0.1049017464 0.0564241942 0.0709964087 0.0059554428 0.0051253904 -0.0050816072 -0.0067946702 -0.0135614810 0.0104819500 0.0103349363 0.0091817111 0.0104825302 0.0245534717 0.0270822283 0.0075179582 -0.0102276344 -0.0007848936 -0.0017685315 -0.0210182509 0.0278680433 0.0161689987 -0.0042084001 0.0118873634 0.0217723844 0.0133679448 -0.0085763618 0.0040470130 -0.0032682320 -0.0097682239 0.0004553063 -0.0652017472 -0.0632195298 -0.1694142362 -0.0142176558 0.0088262135 0.0234747451 -0.0016505488 -0.0118546379 0.0136048194 0.0079830535 -0.0115817154 -0.0070672489 0.0126443931 -0.0065142429 -0.0176109302 -0.0335293388 0.0114069235 0.0287623022 -0.0103536168 -0.0027924197 0.0292005777 0.0226807246 -0.0001120075 -0.0024982564 0.1814715154 -0.1347701093 -0.1111880041 -0.0207668852 0.0134251647 -0.0072534238 0.0120461921 0.0149372818 0.0032242848 0.0051269524 -0.0089816959 -0.0045562209 -0.0003158798 0.0000304715 -0.0029465188 0.0003927712 -0.0011265675 0.0051292009 -0.0341514264 0.0570820915 0.0028755273 0.0000665949 0.0030045690 0.0008615798 -0.0003596587 0.0032155097 0.0014906715 -0.0036452051 0.0056641445 0.0077059538 0.0126440781 0.0004514546 -0.0078741377 -0.0052539506 -0.0160763467 -0.0036375015 -0.0136712400 -0.0135962129 0.0033544112 0.0022745585 0.0007605263 -0.0037610685 0.0155165168 -0.0096797530 -0.0081353960 0.0158479631 -0.0259622325 -0.0131990986 -0.0164016744 -0.0344242255 -0.0074580267 0.0057477722 0.0302658382 0.0071979851 -0.0076075320 -0.0410010895 -0.0057968892 0.0119596473 -0.0542662688 -0.0653512860 0.0032215179 -0.0097642178 -0.0003142553 0.0022872715 -0.0104978664 -0.0025763205 -0.0040577113 0.0040543855 0.0002129273 0.0125412870 0.0136797335 -0.0010954099 0.0104636494 0.0231175163 0.0000677851 -0.0173408706 0.0002619363 0.0062713643 0.0039706736 -0.0005557483 0.0098541120 0.0061811898 0.0269726242 -0.0164701165 -0.0139052788 0.0386006766 0.0003120133 -0.0135891377 0.0121485783 0.0169187242 -0.0045018431 -0.0140775381 -0.0002791645 0.0021838569 0.0021456755 0.0009182003 0.0003922867 0.0080301737 0.0041977567 -0.0126100317 0.0401728276 -0.0083362722 0.0000994174 0.0092887784 0.0034668144 -0.0003679975 0.0133312208 0.0042761616 0.0058718119 0.0057943378 -0.0031932983 0.0125711318 -0.0547661113 0.0133853819 -0.0121019991 0.0279294595 0.0001618866 -0.0165220217 0.0595238052 0.0008553822 -0.0065002125 0.0422059609 -0.0244917231 -0.0026563856 -0.0021301752 0.0001696624 -0.0004120686 -0.0040168677 -0.0018713809 -0.0648930763 0.0474946582 -0.0249354972 0.0010818987 -0.0017804330 -0.0135242170 -0.0553984440 0.0345830716 -0.0178354218 0.0466141416 0.0715730549 -0.2748421644 0.0219257936 -0.0845047432 -0.0334812249 0.0343479736 -0.1277632652 0.1376759883 -0.0097603566 0.0859777321 0.1704558151 0.0139738521 -0.0136843372 0.0880371351 0.0243622821 -0.1445318638 -0.0949971968 0.0068684026 -0.0102896597 -0.0076818263 0.0020556623 0.0051192265 0.0025358365 0.0058763522 -0.0067443900 -0.0077483134 0.0169810357 0.0185974182 -0.0202626334 -0.0072400665 -0.0058394470 0.0209694863 -0.0035796114 -0.0070388868 0.0098679580 0.0085506647 0.0128807174 -0.0138646317 -0.0080006131 -0.0083231493 0.0062461903 -0.0129278070 -0.0134283903 0.0078433159 0.0283624213 0.0786296106 -0.0588104553 0.0243535408 0.0638009801 -0.0531485873 0.0120791081 -0.0203832643 0.0095874730 0.0167960801 0.0659752466 -0.0585818177 0.0199916107 0.0726563363 -0.0600649234 0.0071733922 -0.0293275375 0.0001800504 -0.0007796554 -0.0218083623 0.0028183653 -0.0077488467 0.0327022193 -0.0059929916 0.0035151675 -0.0149259312 0.0040147499 0.0024585919 -0.0219700376 0.0111232736 -0.0792532775 0.1235637677 -0.0481604104 -0.0744575674 0.1122855655 -0.0481640914 0.0248050861 -0.0158017867 0.0186404543 -0.0520728983 0.0918071911 -0.0261489251 -0.0637211866 0.0897924363 -0.0290650912 -0.0076723620 -0.0025773967 -0.0148957577 0.0012313309 0.0128116957 0.0117784648 -0.0163549838 0.0089537577 0.0103682353 0.0052074636 -0.0020014654 -0.0210094393 -0.0039952266 0.0124646588 0.0131854827 -0.0083817352 -0.0169887390 -0.0255243809 0.0003711594 -0.0048340462 -0.0344120662 0.0059588981 -0.0025393342 -0.0156183283 0.0386089916 0.0777516837 0.1718530417 0.0256839106 0.0221311037 0.0734859538 0.0058784283 0.0043754519 0.0311057641 0.0056589457 0.0097084114 0.0285963184 -0.0346309936 -0.0656420402 -0.1553879074 -0.0320082444 -0.0686140252 -0.1818270921 0.0672905968 -0.0327710071 -0.0393414516 -0.0419188032 0.0285436552 0.0301367827 -0.0568223077 0.0295011444 0.0340744575 -0.0390322068 0.0100559578 0.0206093761 0.2742822214 -0.1191275328 -0.1490531527 0.2505383825 -0.1328517050 -0.1597582738 0.0535361168 -0.0180316455 -0.0438553899 0.0213044736 -0.0114025083 -0.0152923365 -0.2694961792 0.1535591060 0.1586572645 -0.1634826873 0.0759419944 0.1016709928 -0.0088186405 -0.0062147122 0.0048396850 0.0057321311 0.0091651065 -0.0082864879 -0.0154881096 -0.0155524224 -0.0073541175 -0.0198413563 -0.0242180316 -0.0063229522 0.0117772993 0.0007684947 -0.0002603739 0.0153359776 -0.0218314725 -0.0109372303 0.0160543484 -0.0175357162 -0.0197603488 -0.0152904128 0.0057837127 -0.0016688344 0.0029561600 -0.0035249711 -0.0013059244 -0.0100433639 -0.0021447911 -0.0295471680 -0.0007362537 0.0089297904 0.0008500270 0.0014548400 -0.0039184462 0.0023753765 0.0019076554 -0.0050487193 0.0017928289 0.0024737672 0.0042762770 -0.0030969159 -0.0014599844 0.0037273535 0.0029883637 0.0001811187 -0.0064161026 0.0064643683 0.0059838627 0.0018478013 0.0012008118 0.0048671910 -0.0105428155 0.0019209192 -0.0055998249 0.0024832237 -0.0030920508 -0.0030935104 -0.0002077407 -0.0006709665 0.0007299388 -0.0006450184 -0.0004770019 -0.0002141491 0.0002740904 -0.0008415007 0.0026314055 0.0000399200 -0.0008552280 0.0659225326 -0.1965724887 -0.1072501250 0.0132718068 -0.0456653078 0.0207134808 0.0074469265 -0.0242665127 -0.0177624101 0.0054078099 -0.0234173761 -0.0360877513 -0.0659947693 -0.0018457849 0.0246865177 0.0261040321 0.0808363664 0.0135001051 0.0514641302 0.0507585715 0.0056760796 -0.0065884769 0.0013721160 0.0235485801 -0.0318744870 0.0351954260 0.1104456471 -0.0648706984 0.1232252800 0.0535302432 0.0172471048 0.1440419622 -0.0260062616 -0.0152063880 -0.1354791899 -0.0239386659 0.0315043656 0.1598080265 0.0130296331 -0.0254177366 0.1912795518 0.3012078041 -0.0084669104 0.0383660591 0.0061318580 -0.0065684067 0.0398368115 0.0128198033 0.0071413171 -0.0130831211 -0.0160501675 -0.0430683468 -0.0534296454 0.0192517176 -0.0338558966 -0.0879699186 0.0123528293 0.0586168431 0.0007226982 -0.0338970065 0.0208830777 -0.0114004596 0.0533550946 -0.0744699471 -0.0968948500 -0.0418954249 0.0172242441 -0.1372634363 -0.0951890606 0.0811758879 -0.0563513518 0.0146899294 0.0075640911 0.0580786332 -0.0251591376 -0.0016183250 -0.0039919301 -0.0062894342 0.0049155734 -0.0105881083 0.0574155079 -0.0033621636 0.0058505132 -0.0015625674 -0.0010537144 -0.0374261841 -0.0224323054 0.0035182304 -0.0527090729 -0.0215274646 -0.0449387756 -0.0004428379 0.0011647219 0.0594595019 -0.0152105236 0.0544651528 -0.0347747032 -0.0218308401 -0.0563368612 -0.0446912610 0.0209357300 -0.0264363194 -0.0508797108 0.0333711938 -0.0442349499 0.0156512151 0.0065818580 -0.0025361507 0.0011025277 0.0207731538 0.0110760182 0.1869342099 -0.1383845382 0.0734092585 -0.1801382865 0.2558849213 0.0430614382 -0.0360600683 0.1584435487 0.0754969112 0.1151523292 0.1113538634 -0.2059440366 0.0141377075 -0.0948248562 0.1386190075 0.1130322413 0.0197758081 -0.0689744062 0.0337306257 0.1752514530 0.2401192262 0.0552420746 -0.1758825579 -0.0507409027 0.0908935069 -0.1820404864 -0.1063037905 -0.0243202032 0.0454886371 0.0361183339 -0.0106347720 -0.0322569744 -0.0091332652 -0.0245670015 0.0391912252 0.0349074377 0.0015700252 0.0003007933 -0.0010757851 -0.0010126654 0.0020346502 0.0009843231 -0.0002981091 0.0017206068 -0.0014894781 0.0019235467 -0.0042166347 0.0021724889 -0.0011606134 0.0023997264 -0.0004446995 -0.0018785936 0.0010322772 -0.0008658678 -0.0065323460 -0.0028789235 0.0046309988 -0.0046466250 -0.0040112894 0.0060545677 0.0044290344 -0.0001077868 -0.0007696843 -0.0088345838 -0.0028417531 0.0018358813 -0.0066573075 -0.0043210337 0.0062190287 0.0010333897 -0.0036665481 0.0070418198 -0.0005706433 -0.0066026890 0.0062712127 -0.0027364982 0.0087368850 -0.0017454679 0.0020789709 -0.0035152566 -0.0052849990 0.0049908188 -0.0045762648 -0.0036407874 -0.0170334261 0.0355516028 -0.0050818390 -0.0224244466 0.0319572369 -0.0085499351 -0.0026497663 -0.0100550307 0.0018320850 -0.0089258242 0.0110937452 -0.0094368834 -0.0082477114 0.0278703005 -0.0092556179 -0.0024687505 -0.0023047347 -0.0037289515 -0.0002455823 0.0024908604 0.0044704872 0.0028988726 0.0001825224 -0.0051457428 -0.0016721477 0.0041694219 0.0037669088 -0.0014449760 0.0021140438 0.0027794002 -0.0010336742 -0.0047985649 -0.0038389076 -0.0001613069 -0.0041971697 -0.0052636972 0.0033446043 0.0008400651 -0.0040431611 0.0036974914 0.0117067822 0.0343300776 0.0072839786 0.0058001841 0.0140371679 0.0008409565 -0.0022421852 0.0068533898 -0.0018008421 0.0043777029 0.0048558582 -0.0021925005 -0.0159564666 -0.0290619436 -0.0084708057 -0.0096083821 -0.0339182137 0.0049663380 -0.0008726190 -0.0028665967 -0.0033503459 0.0022189896 0.0019748267 -0.0033685743 0.0036906985 0.0009641295 -0.0036389478 -0.0019813425 0.0001501957 0.0173858257 -0.0038154507 -0.0068933271 0.0113251194 -0.0097442208 -0.0086426719 0.0036751570 0.0013688627 -0.0045145996 0.0020152893 -0.0014017689 0.0003806954 -0.0176579023 0.0111686240 0.0058040903 -0.0121446560 0.0047968455 0.0091558430 0.0390147230 0.0214170585 -0.0204989108 -0.0469585879 -0.0435067564 0.0356148790 0.0789855963 0.0846826312 0.0300319196 0.0618554958 0.0976661973 0.0318154010 -0.0463642712 0.0010097436 0.0076049095 -0.0629402684 0.0668740343 0.0456212942 -0.0785230998 0.0653722652 0.0575647735 0.0612677426 -0.0122509632 0.0037648221 -0.0003160241 -0.0083295580 -0.0146570718 -0.0491720654 -0.1356480011 -0.4046055119 0.0025630240 0.0342954245 0.0412797540 0.0110508957 0.0270215455 0.0481087988 -0.0024572303 -0.0156764172 -0.0286458655 -0.0101406061 0.0125305717 0.0059773210 0.0335627900 -0.0087854664 -0.0129825821 0.0016501958 -0.0186564081 -0.0054318666 -0.0108468029 -0.0043721144 0.0038156723 -0.1070778018 0.0598000768 0.0816099783 -0.0063890297 0.0003736098 -0.0089339019 -0.0067540359 0.0002692910 0.0051592183 0.0021708800 -0.0002403269 0.0006732412 0.0017046649 0.0005254091 -0.0009621982 0.0006497314 -0.0011498069 0.0005003610 -0.0004550926 0.0021259451 0.0008086170 0.0003443049 0.0032354207 -0.0005409698 -0.0008269241 0.0013329286 0.0010244817 0.0009461685 0.0000537220 0.0008293270 0.0016380127 0.0001456759 0.0004197257 -0.0004039070 -0.0024122253 0.0003567499 -0.0007000176 0.0002529252 -0.0025780266 0.0002543782 -0.0002716293 -0.0008168298 -0.0021324308 0.0002883390 -0.0066256111 0.0005318833 -0.0028486269 -0.0006170545 0.0074319470 -0.0028196048 0.0104698123 -0.0001171280 0.0018932457 0.0002631031 -0.0007977354 -0.0005859882 0.0005605895 -0.0030560934 0.0016329775 -0.0055029985 -0.0001613162 0.0000419480 -0.0002373769 -0.0001051483 -0.0001251948 -0.0001637226 0.0006061810 0.0001592302 0.0005211637 -0.0001397713 0.0000775885 -0.0003711780 -0.0001718787 0.0000778543 -0.0004659987 0.0002813720 -0.0001600458 0.0003582728 -0.0008969752 0.0006417215 -0.0036901084 0.0013285944 0.0000047941 0.0028747312 0.0016586092 -0.0005070100 0.0029935134 -0.0011794451 -0.0000998067 -0.0031952744 0.0001873742 -0.0004023583 0.0010184837 -0.0008005354 -0.0006609696 -0.0002036280 0.0000137328 -0.0017293832 0.0067601317 0.0004879741 -0.0206358767 0.0018353607 0.0000200275 0.0006054341 0.0005257316 -0.0000999135 0.0013184867 0.0004826079 0.0004709246 -0.0001050892 0.0004831701 -0.0004137782 -0.0001017916 -0.0076226162 -0.0007884436 0.0028380579 0.0093518546 -0.0015972905 0.0006546236 0.0043000325 0.0023319202 -0.0024309961 0.0054348225 -0.0000783885 -0.0002070511 -0.0000453179 -0.0000466230 -0.0003070980 -0.0001885414 -0.0244338004 0.0298723340 -0.0151512627 0.0142916174 -0.0160839592 -0.0135357271 0.0173788450 -0.0302130511 -0.0074461538 0.0002816188 0.0005655692 -0.0044644542 0.0008342115 -0.0077966060 0.0055737759 -0.0001764916 -0.0101943614 0.0129928725 0.0004945408 -0.0090195270 -0.0171370718 -0.0036014159 0.0109364786 -0.0005571340 -0.0039699185 0.0215839567 0.0145237003 0.0005875992 -0.0008755394 -0.0007031243 0.0000123268 0.0003674210 -0.0001974724 0.0005886329 -0.0006818833 -0.0008386334 -0.0037157510 -0.0105836553 0.0072364724 0.0042632811 0.0087398617 0.0006657554 0.0047803376 0.0034882543 -0.0016226860 -0.0015500234 -0.0088843023 0.0051152402 -0.0023203363 0.0073701201 -0.0035269758 0.0007981238 0.0087015875 -0.0022565175 -0.0116013992 -0.0211524024 0.0285493809 0.0000650214 -0.0306237059 0.0200448720 0.0050726166 0.0059777580 -0.0048012077 -0.0278718477 -0.0300554889 0.0241862151 -0.0188320210 -0.0238726818 0.0304728598 -0.0015242332 0.0155182096 0.0137278383 0.0005156202 0.0109929312 0.0057446974 -0.0009946622 -0.0154913550 0.0011816274 0.0030236811 0.0067102307 -0.0070356028 0.0092008037 0.0116022141 -0.0147092811 0.0415832089 -0.0365438597 0.0297625581 0.0309054046 -0.0444937332 0.0276641233 -0.0290646332 -0.0035832154 -0.0147473657 0.0266778965 -0.0408042326 0.0058530007 0.0425953452 -0.0281066657 0.0095521973 -0.0021387979 -0.0029977154 -0.0016307717 -0.0001021947 0.0004631060 0.0045148850 0.0217894747 -0.0083611456 -0.0212229786 -0.0082770258 0.0103790451 0.0287676033 -0.0009567087 0.0157204597 0.0484248589 -0.0143318046 -0.0393216426 -0.0832227814 -0.0097810936 -0.0394527050 -0.0721994189 0.0130749745 0.0022495736 -0.0371031508 0.0463960764 0.1556929179 0.4157249225 0.0468027883 0.0815575293 0.1646369117 0.0127724438 0.0094364381 0.0768911800 0.0035323001 0.0309363527 0.0643778096 -0.0895456892 -0.1559092989 -0.3677165155 -0.0863417256 -0.1549828459 -0.4371050663 -0.0352014319 0.0243953665 0.0239250294 0.0193732371 -0.0129894596 -0.0205329606 0.0288124468 -0.0016241908 -0.0238492865 0.0095242620 -0.0176578770 -0.0154639668 -0.1227864558 0.0742474645 0.0759577057 -0.1374859768 0.0560287413 0.0742500520 -0.0228107487 0.0224770319 0.0148504833 -0.0015498551 0.0002075512 0.0212932658 0.1206600159 -0.0635704352 -0.0937484567 0.0782698166 -0.0358383064 -0.0289020492 -0.0006153766 -0.0003751206 0.0004834331 0.0011508979 0.0012643693 -0.0009181914 -0.0013995102 -0.0015072791 -0.0009449008 -0.0015461583 -0.0021782588 -0.0006622603 0.0009098958 -0.0001308715 0.0003057142 0.0027216114 -0.0028991009 -0.0021647009 0.0001199039 -0.0010269909 -0.0017298895 -0.0002395718 0.0011811083 -0.0011146563 -0.0059644677 -0.0073463378 0.0101837673 -0.0890096976 0.0068003408 -0.0626105414 -0.0328438712 0.0278086203 0.0022635275 0.0021442340 -0.0048450050 0.0158139098 0.0013749330 -0.0178627227 -0.0073434937 0.0041304391 0.0058611674 -0.0057242825 0.0055825492 0.0018494562 -0.0089981068 -0.0287244605 -0.0321937297 -0.0106460673 -0.0112703189 0.0135199728 -0.0034468570 -0.0764970972 -0.0331678352 -0.0292046549 -0.0002040844 -0.0008345974 0.0091777918 0.0081512986 0.0140549145 0.0056546088 -0.0006687481 -0.0060444511 -0.0017863533 0.0040320332 0.0078347530 -0.0045808047 -0.0020679192 -0.0010733752 0.0026266401 -0.0232343264 0.0624023127 0.0379158287 -0.0056499244 0.0124882347 -0.0067194302 -0.0020083338 0.0072162691 0.0050130815 -0.0026361595 0.0086019940 0.0101568599 0.0207895534 0.0005876369 -0.0082101018 -0.0089851559 -0.0246527480 -0.0047721388 -0.0137754673 -0.0162517408 0.0009825536 0.0013007683 -0.0000346518 -0.0074440244 0.0111063714 -0.0087661519 -0.0322558057 0.0189761712 -0.0377073187 -0.0160765708 -0.0144762126 -0.0403392748 -0.0068647999 0.0037531048 0.0416577813 0.0084815127 -0.0073007294 -0.0508062200 -0.0051788895 0.0300655793 -0.0787177771 -0.0661244221 0.0040202897 -0.0142863899 -0.0007273961 0.0024995769 -0.0121169159 -0.0020467105 -0.0054832062 0.0041518282 -0.0001550376 0.0145871862 0.0172795720 -0.0058394906 0.0134872392 0.0282542039 0.0008549784 -0.0213320245 0.0005567497 0.0080562424 0.0043755639 -0.0012346134 0.0150208303 0.0190418153 0.0402973350 0.0021398162 -0.0134665132 0.0455018799 -0.0020764364 -0.0174323586 0.0150005918 0.0196787634 -0.0085843565 -0.0161617309 -0.0037274939 -0.0000014539 0.0004028630 0.0014742222 0.0005060996 0.0021059309 0.0063960183 0.0320357444 -0.0210410262 0.0140277686 0.0002540207 -0.0028306791 0.0037691023 -0.0024186912 -0.0030670211 -0.0015204160 0.0015004362 -0.0033359678 -0.0057275959 -0.0170505526 0.0249111292 0.0816736487 0.0259295960 -0.0403323811 -0.1063761863 0.0405300484 -0.0350146225 -0.0515840147 -0.0117755402 0.0077735391 -0.0510864953 0.0008980351 0.0026694796 0.0006997937 0.0012519516 -0.0021404731 -0.0015454304 0.2896293775 -0.3722563287 0.1873393939 -0.1367366145 0.1397199338 0.1747205703 -0.2035158281 0.3446366550 0.0836326263 -0.0519939872 -0.0628629820 0.2153892155 -0.0200578325 0.1548701802 -0.1023456968 -0.0417905787 0.1722582804 -0.2006485539 -0.0155137404 0.0330117859 0.0926621856 0.0259327785 -0.0841830450 -0.0039063259 0.0152511008 -0.1833410502 -0.1300852185 -0.0041023291 0.0005777941 0.0000910152 0.0020947841 -0.0034679777 0.0006538382 -0.0032510924 -0.0025481799 0.0034777845 0.0297710986 0.0204892060 -0.0255363353 -0.0127254037 0.0127572936 0.0444203391 -0.0024966119 0.0031705878 0.0260038103 0.0159744705 0.0088519905 -0.0129793791 -0.0136794774 -0.0213532681 -0.0074070312 -0.0318887357 -0.0273515942 -0.0135767528 0.0057180866 0.1081963581 -0.0510956447 0.0314902607 0.0886712309 -0.0483930270 0.0573359313 -0.0294986563 0.0015268691 0.0198712303 0.0629537853 -0.0810403972 -0.0146171468 0.0746462775 -0.0744185845 -0.0095374073 0.0046903727 -0.0561648272 0.0044664982 0.0052180156 -0.0308835530 0.0215330646 -0.0077189840 0.0080310097 -0.0191958632 0.0087473989 0.0231856124 -0.0457788280 0.0072463833 0.0381370999 0.0014612175 -0.1166433155 -0.0158240789 0.0487856672 -0.0761277864 -0.0045188030 0.0622014512 0.0481825783 0.0187075087 0.0229821901 -0.0577542716 0.0441137245 -0.0284252633 -0.0897625429 0.0325626516 -0.0300651445 -0.0234324319 -0.0533054854 0.0011496119 0.0379809672 0.0535238555 -0.0526479993 0.0144459334 0.0624355889 0.0216337286 -0.0372372598 -0.0703342503 -0.0174844974 0.0066372474 -0.0018262672 -0.0029669702 -0.0193120593 0.0029276797 0.0100432225 -0.0083909538 0.0001440063 0.0332851776 0.0127220235 -0.0095972823 0.0029374464 -0.0001114801 0.0166764463 0.0425215482 -0.0103486141 -0.0142147115 0.0013978022 -0.0325140452 0.0136012258 -0.0167835365 0.0147946730 0.0017421835 0.0388712997 -0.0404280410 -0.0005277009 -0.0216072356 0.0034777838 -0.0249885543 -0.0131793241 0.0245045949 -0.0038874485 0.0007432236 -0.0188030677 -0.0215006383 0.0223981001 0.0300107664 -0.0231713313 -0.0049937544 -0.0201601468 -0.0129956363 -0.0262764929 0.0795726867 0.0570534604 -0.0717749394 0.0131357156 0.0301637487 -0.0052202155 0.0179068758 0.0140150159 0.0130329410 -0.0043239445 0.0391376097 0.0662748372 -0.0292977333 -0.0456982850 0.0740912225 -0.0110210019 0.0062673076 0.0051850836 0.0041101595 0.0011790543 0.0122706059 0.0127430559 -0.0056735852 0.0057215623 0.0071626727 -0.0071053017 -0.0036891398 -0.0063306632 -0.0049905302 -0.0061621770 0.0005684169 -0.0037246174 -0.0071857210 0.0158249996 0.0031413596 -0.0014956142 0.0058418945 0.0070229786 -0.0093159152 -0.0121811782 0.0138840099 0.0020625267 -0.0106473518 0.0097925872 -0.0790789390 0.0322916255 -0.0312594241 -0.0284225175 0.0377516137 -0.0063513097 0.0133362726 -0.0218098001 0.0115689166 0.0167444192 -0.0279280877 0.0042507323 0.0203569305 0.0109808904 -0.0064600477 0.0015541855 0.0157137919 0.0059629643 -0.0577556879 -0.0557829944 -0.0147372488 -0.0180930824 0.0215253399 -0.0085610503 -0.0811264935 -0.0966509729 -0.0876699910 0.0054885682 -0.0085945206 0.0080100678 -0.0071891900 0.0051177472 0.0000394239 -0.0008434722 0.0033557950 -0.0023307513 -0.0027102138 -0.0050089186 0.0026152268 -0.0008128885 0.0006991948 0.0014211715 0.0295492097 -0.0688574965 -0.0314103905 0.0031932316 -0.0168276303 0.0078061668 0.0023106316 -0.0078531048 -0.0069442407 0.0007614200 -0.0082535386 -0.0124912928 -0.0219589384 -0.0003815290 0.0095081062 0.0086146231 0.0283000887 0.0032935024 0.0183004411 0.0145888926 0.0067874752 -0.0029489470 0.0003922932 0.0070585726 -0.0127454870 0.0125742887 0.0340878528 -0.0193710687 0.0415655248 0.0168054091 -0.0125623833 0.0544723804 -0.0341707839 -0.0037515742 -0.0446772603 -0.0093332890 0.0085680191 0.0520106450 0.0047207648 -0.0256336507 0.0767973754 0.0752881635 -0.0036533884 0.0142660060 0.0005611105 -0.0032079214 0.0125633632 0.0008322389 0.0064906959 -0.0044111993 0.0028202731 -0.0158894439 -0.0173411797 0.0039187166 -0.0141092734 -0.0281973510 -0.0024852731 0.0213043563 -0.0007237851 -0.0062788964 -0.0110997202 0.0036236672 -0.0310992150 -0.0123810902 -0.0424235944 0.0132926600 0.0227675663 -0.0490582427 0.0154476786 0.0128328970 -0.0143152476 -0.0287517690 0.0124063917 0.0157188687 0.0117586218 0.0018054241 -0.0007094285 -0.0009913832 -0.0018849752 0.0007103043 -0.0187833150 0.0506037932 -0.0347053498 0.0215477494 -0.0006760613 -0.0005145992 -0.0047647777 0.0018143296 -0.0012950805 -0.0002503596 -0.0043622713 0.0027200345 0.0058130170 0.0182404929 -0.0208436542 -0.0729587568 -0.0252335774 0.0347182211 0.0944160910 -0.0375930458 0.0308260363 0.0457015980 0.0084294139 -0.0073707251 0.0456956777 0.0003646833 -0.0018078752 -0.0008301261 -0.0009994577 0.0032718952 0.0021108826 -0.2519879644 0.3307311854 -0.1654773161 0.1158721129 -0.1149366072 -0.1573825835 0.1888361302 -0.3118938065 -0.0734257025 0.0462831555 0.0567150536 -0.1912355002 0.0185707835 -0.1420293575 0.0994862750 0.0390287440 -0.1542181740 0.1781741740 0.0166830198 -0.0248902429 -0.0802790286 -0.0215924833 0.0687333196 -0.0035073833 -0.0105576469 0.1649363688 0.1179574036 0.0017311971 0.0027292041 0.0025186670 -0.0027116383 0.0005422176 -0.0016020863 0.0012254707 0.0046400264 -0.0006945036 0.0235321820 0.0282598131 -0.0292299815 -0.0092128639 -0.0111775640 0.0181331068 -0.0079860525 -0.0096268678 0.0058946465 0.0101255671 0.0158276134 -0.0161900348 -0.0078190056 -0.0075336540 0.0116393829 -0.0117313818 -0.0143657941 0.0122721857 0.0303082719 0.0758652951 -0.0637097411 0.0188712248 0.0760463104 -0.0637646439 0.0065147314 -0.0222979046 0.0119979134 0.0246086393 0.0874262638 -0.0702716527 0.0264369850 0.0782143583 -0.0628763605 -0.0159785002 0.0068251394 -0.0873643902 0.0031466452 0.0142246546 -0.0511456448 0.0354247443 -0.0166128370 0.0129203501 -0.0296404851 0.0149323557 0.0383873183 -0.0711679100 0.0107708111 0.0620953521 0.0169546096 -0.2062488409 -0.0177985345 0.0877406353 -0.1522222296 -0.0024269750 0.0970701568 0.0773952912 0.0287293377 0.0375756593 -0.0826458954 0.0689719735 -0.0471946617 -0.1365553516 0.0514036503 -0.0054366266 0.0003643449 -0.0119318670 0.0016293111 0.0111861039 0.0075580991 -0.0821921872 0.0226002081 0.0992388887 0.0338172813 -0.0592367141 -0.1102442801 -0.0178834172 0.0048726635 -0.0056758696 0.0028162953 -0.0175709755 0.0103687997 0.0096335647 -0.0127632621 0.0082027388 0.0349084089 0.0127683456 -0.0081430257 -0.0061974472 -0.0176738013 -0.0078075804 0.0428787191 -0.0170218280 -0.0239611381 -0.0027669004 -0.0329115789 0.0086780672 -0.0252243352 0.0186425452 -0.0035033318 0.0468411906 -0.0300700106 0.0228593047 -0.0263214313 0.0175398510 0.0080410613 0.0010108413 0.0338076834 -0.0136417434 -0.0091417109 -0.0257171572 -0.0328025657 0.0224983399 0.0576268770 -0.0352764464 -0.0256452659 -0.0399706321 -0.0232832870 0.0158315290 0.1112318896 0.0667969672 -0.0674761664 -0.0136527072 -0.0037662100 0.0044979656 0.0335560229 0.0121007215 0.0294537191 -0.0089025530 0.0710731180 0.0570673085 -0.0132278719 -0.0523994163 0.1084860041 -0.0003022192 0.0323921768 -0.0012973760 -0.0017652433 -0.0026167178 -0.0138342865 -0.0141965822 0.0077206299 0.0021804219 0.0020493188 0.0090249455 0.0087566594 0.0132563089 0.0066433398 0.0021563971 0.0009593055 0.0039781221 0.0011520171 -0.0137849780 -0.0009974427 -0.0075664372 0.0066814826 0.0022590359 0.0120931524 0.0112896815 -0.0130811951 0.0195224213 0.0173141306 -0.0176116203 0.1875144852 -0.1085853000 -0.0879069518 0.0839209985 -0.0584978235 0.0208201278 -0.0009429590 0.0130613219 0.0294397391 -0.0037091355 0.0053030914 -0.0175701097 -0.0223118455 -0.0370125016 0.0086508153 -0.0107636458 -0.0383431786 0.0094029439 -0.0054864062 0.0133886131 -0.0242599969 -0.0207326620 -0.0151896746 -0.0129365048 -0.0034627602 0.0126806759 -0.0260125241 0.0163850459 0.0002078891 0.0138370081 -0.0143667302 -0.0074513370 0.0082501166 -0.0012112058 -0.0021987413 -0.0008424859 -0.0013673108 0.0050513895 0.0034904431 -0.0034999823 0.0060319267 -0.0062576650 -0.0224129964 0.0283793864 -0.0060150342 -0.0007348321 -0.0036121008 0.0030670078 0.0004322635 0.0005026893 -0.0009583215 -0.0036235627 0.0042669874 0.0007923740 0.0049185484 0.0002046455 -0.0046121910 -0.0035311453 -0.0051178945 -0.0030485206 -0.0023787512 -0.0077771478 0.0076921106 0.0005383250 0.0004442722 -0.0002475734 0.0101599133 -0.0030080922 0.0031989713 0.0064279447 -0.0098125250 -0.0041103460 -0.0281284946 -0.0065154069 -0.0355804310 0.0032188874 0.0123718690 0.0053219790 -0.0024612533 -0.0199536465 -0.0049362432 0.0199119285 -0.0382112305 -0.0137853781 0.0011284750 -0.0054589449 0.0015078278 0.0038421706 -0.0054360262 0.0032615073 -0.0086562796 0.0010225225 -0.0092786388 0.0109368665 0.0068740274 0.0052559271 0.0075979862 0.0109828601 0.0065288269 -0.0094460650 0.0016711950 -0.0033838567 0.0221856295 -0.0101374562 0.0651808724 -0.0183580091 0.0196583514 -0.0598974721 -0.0428181353 0.0330165288 -0.0487970754 0.0109420082 0.0065955690 0.0464282973 -0.0151350063 -0.0031583399 -0.0298596252 0.0017764369 0.0013499176 0.0001821931 0.0018831147 0.0016010694 0.0085700718 0.0097173950 0.0240415869 0.0023145695 -0.0001946198 0.0022111828 0.0015891504 0.0006407539 0.0002578223 0.0001587221 0.0024803944 -0.0004352704 -0.0040986258 -0.0078457380 0.0027218626 0.0425619670 0.0117884172 -0.0135301381 -0.0515943612 0.0163609745 -0.0090099097 -0.0239840177 -0.0050672687 0.0101460713 -0.0288528260 -0.0004628570 0.0012860117 0.0008301965 0.0004219789 -0.0021708517 -0.0014844192 0.1248019718 -0.1707480468 0.0854585270 -0.0610334103 0.0587601553 0.0828253809 -0.1122424864 0.1741536518 0.0350732252 -0.0075204510 -0.0145541425 0.0521175976 -0.0091557835 0.0676020895 -0.0570991618 -0.0107652038 0.0734587830 -0.0856402697 -0.0113052147 0.0246553261 0.0675027095 0.0137196849 -0.0387282256 0.0158412686 0.0083685507 -0.1122983655 -0.0793602909 -0.0004065234 -0.0012900667 -0.0008611895 0.0014826989 -0.0004303968 0.0011478408 -0.0011152861 -0.0009781987 0.0003658768 -0.0770751867 -0.0236157541 0.0441295774 0.0317733212 -0.0899568888 -0.1387664064 -0.0076448284 -0.0477139186 -0.0796562164 -0.0493581035 0.0086056456 0.0117696518 0.0401306531 0.0659651051 0.0552019785 0.1116743218 0.0818716685 0.0908668179 0.0846793222 -0.2216378769 0.0112924470 -0.0517976588 -0.1259490436 -0.0062412432 -0.2262799610 0.0846999546 0.0130696149 -0.0364246601 -0.0794287881 0.1815349898 0.1393063571 -0.1369219237 0.1629374009 0.0085615912 -0.0285249140 -0.0967310931 0.0298537853 -0.0087173430 -0.0589337233 0.0132999994 0.0208751803 0.0032388503 -0.0209672833 0.0004741992 0.0641398282 -0.0603955418 -0.0172275507 0.0783748486 -0.0714958134 -0.0286122783 -0.0963729591 0.0289491311 0.0471165086 -0.0525882607 0.1149865939 0.0505205849 0.0465352499 -0.0234886038 0.0707705104 0.0460314814 -0.1217876538 -0.0122857100 0.0197480752 0.1152988213 0.0984973647 0.2028368032 -0.0028047136 -0.1395348472 -0.2112702513 -0.0913275013 0.0302021460 0.0998391593 0.0377849373 -0.0544890938 -0.1222588381 0.0491407695 -0.0022649934 0.0241042104 -0.0059233181 0.0245372413 -0.0589344995 -0.0288307462 0.0220687922 -0.0373832824 -0.0911201603 -0.0384084472 0.0187601369 0.0325642610 0.0791622406 0.1165494931 -0.1023025121 0.0395046426 0.0907312678 0.0033157060 0.0983075277 -0.0036750491 0.0560261110 -0.0326959827 0.0244167722 -0.1404594971 0.0528726456 -0.1450992876 0.0296154383 -0.0858294588 -0.1413037158 0.0004658311 -0.0024780492 -0.0008222159 -0.0050906473 0.0045949652 -0.0059404656 0.0009886490 0.0125693858 -0.0020550441 -0.0022209929 -0.0003548090 -0.0011617174 0.0120257488 0.0084574460 -0.0074315367 0.0035566928 -0.0004585350 -0.0078052482 0.0053469204 0.0034106330 0.0001661360 0.0087683847 -0.0057458406 0.0142115794 -0.0125685795 0.0060684635 -0.0006019147 -0.0028998835 0.0006307400 0.0223926529 -0.0020980832 0.0003138042 0.0007847329 0.0053294190 0.0019105734 -0.0008795825 -0.0059901098 -0.0069010688 -0.0006885670 -0.0004231545 -0.0031309682 -0.0022009032 0.0011514935 0.0014986885 -0.0037321002 -0.0089290227 0.0049087748 0.0051408321 0.0128266155 -0.0032985746 0.0022240093 -0.0061998977 -0.0076939182 0.0093529087 0.0632354958 -0.0558997811 0.0129144585 -0.1277338709 0.1729014224 0.0105857075 -0.0230435643 0.1387139442 -0.0493817983 0.0425347026 -0.0909094006 -0.0197553919 0.0270678006 -0.1107558563 0.0725376809 0.0835706660 0.0833567126 -0.0704696635 -0.0173961488 0.0987799157 0.0441238565 -0.0631355161 -0.1251426033 0.0651447787 0.0395640996 0.0731689961 0.0260370845 -0.0193509729 -0.2318436721 -0.0842369760 -0.0888633892 0.0308238461 -0.0237560805 -0.0629096454 -0.0265862712 -0.0183991653 0.0222917303 -0.0055034742 0.0031234362 0.0265888414 0.0140576493 -0.0175383053 0.0098012430 -0.0083048299 0.0236276666 -0.0124283193 0.0288035103 0.0011675320 -0.0016079155 0.0174358286 -0.0047085236 -0.0038424581 0.0080681271 0.0067698919 0.0026961544 0.0050356146 0.0053412587 0.0108178647 0.0021290312 -0.0041884246 -0.0050972087 -0.0182562495 0.0006257038 -0.0024267566 -0.0029306497 -0.0090793431 0.0017548444 -0.0015343592 -0.0046391312 0.0041590267 0.0019894138 -0.0166720116 -0.0004857613 -0.0201390682 -0.0138868781 0.0212280656 -0.0166840919 0.0282686282 -0.0001525330 0.0202145592 0.0065576737 -0.0058456018 -0.0191679436 -0.0000977886 0.0065348061 -0.0281838968 -0.0286009900 0.0000215055 -0.0047167209 -0.0002556359 0.0019936188 -0.0045217961 0.0017883973 -0.0026168876 0.0016268436 -0.0035239579 0.0070618705 0.0058438535 0.0000404627 0.0045116274 0.0094869504 0.0017488218 -0.0051849834 0.0002900540 0.0002964373 0.0097468545 -0.0030813408 0.0246909925 -0.0003712661 0.0119874806 -0.0170093679 -0.0204626779 0.0224867041 -0.0119862376 -0.0003385422 0.0045633202 0.0124119858 -0.0110159006 -0.0047575411 -0.0155900168 -0.0064869549 -0.0054688929 -0.0052619200 0.0090910529 -0.0103747688 0.1481546486 0.0428579661 -0.0587999355 0.0197734547 0.0000121473 -0.0001111225 0.0026054852 -0.0005769343 -0.0005005019 -0.0004079985 -0.0014489665 -0.0018639974 -0.0017408650 -0.0050575832 0.0030958584 0.0187085826 0.0070837035 -0.0065988104 -0.0212818147 0.0084535050 -0.0054976018 -0.0111462986 0.0000912085 0.0028900487 -0.0119685887 0.0020286825 0.0020232679 0.0001096440 0.0007137021 -0.0020693961 -0.0014373696 0.0522327163 -0.0758821188 0.0366480931 -0.0236227781 0.0217343357 0.0385259851 -0.0501615406 0.0786885559 0.0179451957 -0.0029922347 -0.0072189068 0.0340650377 -0.0052732258 0.0344494655 -0.0291457995 -0.0067170617 0.0364681388 -0.0417723068 -0.0066863009 0.0028192655 0.0192848419 0.0042604510 -0.0109169772 0.0083962611 -0.0006375031 -0.0466688065 -0.0338743323 -0.0018420508 0.0001897394 0.0006202999 0.0001878540 -0.0050938858 -0.0022438602 -0.0018864887 -0.0000176673 0.0012329672 0.0407912690 0.0592224169 -0.0580333785 -0.0148727751 -0.0912043465 -0.0469664553 -0.0535980994 -0.0702564501 -0.0449050024 0.0028820972 0.0436166157 -0.0346936868 -0.0071079263 0.0445579486 0.0835023118 0.0379452727 0.0251338598 0.0989984066 0.1245607762 0.0735269619 -0.1910830372 -0.0037152958 0.1882884223 -0.2306110450 -0.1126510055 -0.0012237477 0.0329949651 -0.0078181277 0.1957072746 -0.0576278753 0.1441186485 0.1230362031 -0.0352851518 -0.0320940773 0.0428165254 0.0834691961 -0.0590963177 0.0135777822 0.0616319912 0.0114044638 -0.0323614727 0.0052745361 0.0047817869 0.0024242519 -0.0859142802 0.0323523585 0.0295739531 -0.0739369745 0.0845477277 -0.0879781155 0.1285643410 -0.0156885053 -0.1865445944 0.0665728981 -0.0859945627 -0.0171527603 -0.0409611618 0.0470885607 -0.1893899658 -0.0309107505 0.1295974465 -0.0765905241 -0.0065752947 0.0529083028 0.0569763254 0.0899676686 0.0009282508 -0.0551464974 -0.1039957745 0.0651739997 -0.0246819101 -0.0671300554 -0.0286476199 0.0332258162 0.0881028862 -0.0357322563 0.0093269248 -0.0252288678 0.0190538839 -0.0292889381 0.0503199065 0.0086611616 -0.0497980168 0.0376226966 0.0670561096 0.0265480739 -0.0179807693 -0.0463502223 -0.0760559728 -0.0340746987 0.0764186501 -0.0227533643 -0.0522996781 -0.0091742016 -0.0816658681 0.0115524950 -0.0680230636 0.0527124760 -0.0175659289 0.1219506293 -0.0641126382 0.0752701532 -0.0500588910 0.0882461498 0.0689922482 0.0422233258 0.0300674527 -0.0289747764 -0.0236542913 -0.0249539104 -0.0211916878 0.0081903493 0.0787918138 -0.0367668785 -0.0555555737 -0.0645458967 -0.0265868040 0.0892110537 0.1122458877 0.0557179541 -0.0049183082 -0.0911831684 -0.0547565008 0.0174629661 0.0568652004 -0.0219490270 0.0307097087 -0.0111244953 0.0734006635 -0.0155637729 0.0460577084 -0.0533634106 0.0887506043 0.0002885697 0.0449507339 0.0012915990 0.0010550342 0.0016231111 0.0072045614 0.0084068342 -0.0044529771 0.0001891998 0.0008803899 -0.0053664964 -0.0068017317 -0.0071378392 -0.0028456068 -0.0015975752 0.0017569106 -0.0012995426 -0.0042232783 0.0016588962 0.0002795830 0.0083260220 -0.0073088268 -0.0033582053 -0.0057698145 -0.0035238854 0.0072394825 0.0035007304 0.0310950557 0.0693105189 0.0817727469 0.3059242013 0.8088662488 -0.0208113384 -0.0654147713 -0.1606459291 -0.0022097995 0.0043371526 0.0217967729 -0.0011719895 -0.0020239236 -0.0055315568 -0.0004384496 0.0054413461 -0.0012952639 0.0078207129 -0.0054305907 0.0079597065 0.0073431437 -0.0137414416 -0.0050352834 -0.0026901092 0.0044948393 0.0041536984 -0.0590647493 0.0305977201 0.0418426904 -0.0068237861 0.0019028735 -0.0059470636 0.0041872918 0.0009601673 -0.0015548238 0.0008389205 -0.0013287831 -0.0002738061 0.0004671264 0.0000442714 -0.0009075414 0.0012191493 -0.0007738377 0.0019362817 0.0006965499 -0.0000794444 0.0006725072 0.0001714504 0.0002869045 0.0000167872 -0.0000559927 0.0001188122 0.0000662256 0.0000639684 0.0001095691 0.0001993211 0.0001521700 0.0000447251 -0.0000906884 -0.0000756573 -0.0003737103 0.0001058315 -0.0000395634 0.0000471630 -0.0002632277 0.0000076758 0.0000268229 -0.0001360789 0.0001825031 0.0003775822 0.0001095360 -0.0003905549 -0.0002098627 -0.0004086283 0.0007547462 -0.0003584401 0.0010019638 -0.0001950998 0.0003852937 0.0001213822 -0.0000398231 -0.0003422305 0.0001070468 0.0008267616 -0.0010941669 0.0004442240 -0.0001326366 -0.0000807928 -0.0002899090 -0.0001211728 -0.0000196279 -0.0002966908 0.0001829159 -0.0000119955 0.0003774601 0.0002527499 0.0000512417 0.0002300912 -0.0000111008 0.0001872522 -0.0001776978 -0.0000352642 0.0000143764 0.0000651209 -0.0008512582 0.0003609594 -0.0020039493 -0.0003104235 0.0002777969 -0.0010109427 0.0001458162 0.0002884931 0.0011957793 -0.0002134596 0.0000889506 -0.0003578206 0.0006302563 -0.0003764338 0.0018178370 -0.0002209973 -0.0002164965 -0.0002514382 0.0004195456 0.0002048731 0.0056438277 0.0022854358 -0.0035002899 0.0014855780 -0.0000379883 -0.0001660305 -0.0000815844 0.0000370705 -0.0002271164 -0.0000904273 0.0000134599 0.0000820325 0.0000158766 0.0001160518 0.0001483768 0.0001974658 -0.0000454374 -0.0001764115 -0.0002101025 -0.0000914110 -0.0000434072 -0.0001645124 -0.0001402485 -0.0000299450 -0.0000957207 -0.0000791198 0.0000116130 0.0000270872 -0.0000154497 0.0000887383 0.0000413688 0.0008674730 -0.0007652227 0.0003476574 -0.0006920514 0.0010014040 0.0003586139 -0.0002111613 0.0007661979 0.0004289219 -0.0008588306 -0.0004467554 0.0012126130 -0.0001537134 0.0002915336 -0.0000030487 0.0006720490 0.0006172617 -0.0008877088 0.0001590309 0.0002763856 0.0001537186 0.0001217628 -0.0005124990 -0.0005100889 0.0002056294 -0.0002370499 -0.0001201301 -0.0000333494 0.0001470063 0.0001026727 -0.0000008971 0.0000881898 0.0001016139 -0.0000406557 0.0000585978 0.0000792932 0.0052230190 0.0178345759 -0.0076701932 -0.0062748354 -0.0067549663 -0.0028198868 -0.0082427096 -0.0009103359 0.0038703285 0.0020408817 0.0080363551 -0.0015500731 0.0066676686 -0.0161526691 -0.0003095424 -0.0026426291 -0.0134308477 -0.0076900203 0.0008748965 0.0082865662 -0.0172576869 -0.0098851291 0.0456281806 -0.0168616929 0.0005561837 -0.0058451791 0.0027972397 0.0569869523 0.0360502746 -0.0343716291 0.0057086606 0.0020444098 -0.0230228062 -0.0003118982 0.0012675684 -0.0001344312 -0.0005732879 0.0016146468 0.0005376551 0.0008138778 -0.0012470259 0.0006872211 -0.0010077392 0.0005469626 -0.0018961171 -0.0000938249 0.0008701639 -0.0015169150 0.0017540537 -0.0046059028 0.0019020939 0.0053287428 -0.0096519625 0.0045093464 -0.0009056365 0.0008430779 -0.0007995694 0.0018028546 -0.0105813210 0.0014830440 0.0020643724 -0.0031342351 -0.0004726867 -0.0002296117 -0.0004495510 -0.0033718960 -0.0005701586 0.0019836291 0.0003805749 0.0004798391 -0.0003779622 -0.0003541613 -0.0001759730 -0.0000327868 0.0006433949 0.0165138338 0.0405233127 0.1004434472 -0.0123195559 -0.0221360270 -0.0487095862 -0.0071129157 -0.0107304430 -0.0410582512 -0.0066144528 -0.0134788541 -0.0388504378 0.0105623693 0.0403306677 0.0866543811 0.0488058338 0.1193315821 0.2969280270 0.0082974951 0.0160979091 0.0437482201 0.0083202837 0.0003552367 0.0100124274 -0.0564355073 -0.0698544749 -0.1884130633 -0.0088324866 -0.0366313527 -0.0954528221 0.0046281170 -0.0000578525 0.0062395809 -0.0060877396 0.0034116918 0.0012583652 -0.0020618709 0.0074108934 -0.0031076528 -0.0065034192 -0.0086219468 -0.0042517904 0.0093269348 0.0026811173 -0.0081714155 -0.0075442809 -0.0076600331 -0.0045688258 0.0027340152 0.0097560094 -0.0073542402 0.0063498185 -0.0035404725 0.0061267470 -0.0053514578 0.0076822694 -0.0148312153 -0.0165224107 0.0065277214 0.0203004028 0.0001507701 0.0001424700 -0.0000970441 -0.0000697016 -0.0001478340 0.0001417253 0.0002456799 0.0002484879 0.0001380139 0.0004630902 0.0003946933 0.0000289597 -0.0002441599 -0.0000613363 -0.0000699366 -0.0004249550 0.0005819298 0.0003075386 -0.0004509838 0.0005080123 0.0004224589 0.0008134293 -0.0003530434 0.0001082751 0.0022003595 0.0014113632 0.0070885917 0.0040893758 0.0304041562 0.0618987992 -0.0026162148 0.0004318257 -0.0156692216 0.0080031018 0.0083819625 0.0058116980 -0.0000482166 -0.0055004853 -0.0021344295 -0.0086126489 -0.0017802415 0.0043342119 0.0133349744 -0.0061546594 -0.0177401766 -0.1153690677 0.0866713153 0.0960819534 0.0521738008 -0.0434777249 -0.0435328212 0.6376756308 -0.4174337596 -0.4333098114 0.0005876772 0.0014836075 0.0019668383 -0.0058432079 -0.0020407687 0.0002046778 0.0003156398 0.0004736870 0.0001039870 0.0013529798 0.0008509682 -0.0005042157 -0.0001667540 -0.0000130339 0.0007643429 -0.0000210568 -0.0002914971 -0.0010002182 -0.0015234523 -0.0003516431 -0.0010965002 0.0002125178 -0.0001786025 0.0003110278 -0.0000688646 0.0000443090 -0.0001182591 -0.0003283094 0.0002477610 -0.0004594449 -0.0003091387 0.0003119342 -0.0004821860 0.0005013264 -0.0000522758 0.0004889335 -0.0000320954 -0.0000832959 0.0001784328 0.0017995292 0.0001223074 0.0035202668 0.0010405350 -0.0004279042 0.0019197337 -0.0017728194 0.0013904094 -0.0028968542 0.0000837862 -0.0002645338 0.0000016796 -0.0000438043 0.0002488863 0.0000148952 -0.0009012982 0.0010042831 -0.0006884237 -0.0000197214 0.0001204895 0.0000760741 0.0000193412 0.0000623381 0.0000580763 -0.0000377156 -0.0000368446 -0.0000621594 -0.0000874939 -0.0000768916 -0.0000420692 -0.0000774150 -0.0001581352 0.0000203091 0.0001473070 -0.0000149250 -0.0000382931 0.0001391704 -0.0000988654 0.0003192081 0.0000330589 -0.0003051594 0.0002169841 -0.0000312906 -0.0002067578 -0.0000562079 0.0000799461 -0.0000279010 -0.0002112415 -0.0000949571 0.0001298211 -0.0003146911 0.0000187031 -0.0000105902 -0.0002367108 0.0002386134 -0.0005455646 0.0050723161 -0.0143788021 0.0353039389 -0.0129031540 0.0001355181 0.0002284537 0.0000303468 -0.0001060641 0.0001903538 0.0000919992 -0.0000923591 -0.0002396226 0.0000160814 -0.0003910689 0.0004637325 -0.0003619010 0.0000509542 0.0002145643 0.0002586485 0.0003943893 -0.0005066019 0.0001097313 0.0003819129 -0.0004579775 0.0003637280 0.0001626887 0.0001001638 0.0000031381 0.0000441539 -0.0001608275 -0.0001096026 0.0000550965 -0.0001557299 0.0005218940 0.0015375114 -0.0030288291 -0.0001304056 0.0017142588 -0.0014498072 -0.0002044145 -0.0006843228 -0.0009543868 0.0026684019 -0.0001417569 0.0009454419 -0.0002692434 -0.0007650349 0.0006979927 -0.0005317668 -0.0001508811 -0.0016079709 -0.0024915550 -0.0003843014 0.0011107625 -0.0001132457 -0.0006296265 0.0016516830 0.0010209796 -0.0000627178 -0.0001398637 -0.0001128531 -0.0000126494 -0.0003335585 -0.0002423530 -0.0000433434 -0.0000811716 -0.0000386951 0.0018733681 0.0019913697 -0.0015148279 -0.0008786091 -0.0012606339 -0.0006359314 -0.0018127180 -0.0008039122 -0.0005187443 0.0004876868 0.0008481600 -0.0003813939 0.0001505216 -0.0004582508 0.0012139223 -0.0000799721 -0.0007928590 0.0002930864 0.0002048910 0.0010890998 -0.0030063101 -0.0018774834 0.0059204189 -0.0038116541 -0.0004513380 -0.0005451352 0.0004135611 0.0037649445 0.0058448727 -0.0036493555 0.0010461092 0.0015637850 -0.0016725502 -0.0012042722 -0.0109913877 0.0100923650 -0.0049509009 -0.0187216711 0.0040064981 -0.0057783271 0.0129134773 -0.0067133364 0.0113572723 -0.0086754665 0.0076981629 0.0018771794 -0.0066580042 0.0104256594 -0.0151085558 0.0400826502 -0.0070584619 -0.0715942016 0.0856514729 -0.0458509866 0.0047268517 -0.0104196810 0.0063155293 -0.0179111925 0.1005881459 -0.0258891366 -0.0130378766 0.0225279486 0.0028618814 0.0001921786 0.0002276045 0.0001199159 -0.0000579282 -0.0000655222 -0.0004311170 -0.0014466533 0.0026768689 -0.0003340518 -0.0003128865 0.0023420420 -0.0015756449 -0.0003342738 0.0032404423 0.0101717656 0.0040154162 -0.0023634016 -0.0085975663 -0.0018342723 -0.0101556588 -0.0003095909 0.0052314369 0.0018812515 -0.0052758895 -0.0083524586 -0.0043178822 0.0140307480 0.0091586266 0.0139035089 0.0223658209 -0.0004090254 -0.0037231487 0.0065822867 -0.0065669516 0.0055902836 0.0003095251 -0.0045986648 -0.0125865220 -0.0177414000 -0.0092022797 0.0006112805 -0.0109855709 -0.0445225687 0.0198850603 0.0152798840 0.0755576009 -0.0435127110 -0.0513113266 0.0365434936 -0.0228861311 -0.0184027234 0.0068212037 0.0115098247 0.0061519016 -0.1606383400 0.0632634416 0.0858918541 -0.0114633765 0.0211920571 0.0173720026 -0.0249689184 0.0045417182 0.0197606862 -0.0340523104 0.0142043498 0.0150649427 0.0261654131 -0.0203940093 -0.0077486550 0.2335524449 -0.1335445487 -0.1595706681 -0.0002157811 -0.0002995271 0.0000959418 -0.0004773973 -0.0000318579 -0.0001060292 -0.0001080849 0.0000089660 -0.0000989250 -0.0007686205 -0.0004507067 0.0000977388 0.0003493291 -0.0000438458 0.0002495512 0.0010984479 0.0004078536 -0.0001069706 0.0013937988 -0.0018228313 -0.0009994725 -0.0027767376 0.0008060485 -0.0001445105 0.0002507283 -0.0000991234 -0.0003000533 0.0011526039 -0.0007434367 -0.0024590815 0.0006240272 0.0003531323 0.0003335619 -0.0000662820 -0.0003170221 0.0000255123 -0.0001714026 -0.0003175085 0.0001460030 0.0001153154 0.0001862132 -0.0002120881 0.0000104818 0.0000215630 0.0001706617 -0.0002496043 -0.0001397218 0.0002882763 0.0002116103 0.0001705288 0.0000060448 0.0007805124 -0.0010210489 -0.0007385952 -0.0003461940 0.0001833683 -0.0000492531 -0.0001360809 0.0001245839 0.0001571835 0.0000610239 -0.0002874073 0.0000381250 0.0001876346 0.0004587530 -0.0001851632 -0.0000111860 -0.0000439913 0.0000576087 0.0040612759 0.0016568809 0.0298247663 0.0039483660 -0.0016899082 0.0106185170 -0.0020651160 0.0024584707 0.0001484989 -0.0050495224 0.0055645914 -0.0007458180 0.0086601825 -0.0009517040 0.0002176801 -0.0051170052 -0.0048109901 -0.0050097515 0.0026619775 -0.0033001028 0.0034045812 0.0006318808 -0.0002483423 -0.0013177687 -0.0073169640 0.0023571223 -0.0292785119 0.0156088901 -0.0159290088 0.0212139699 -0.0104878566 0.0005003809 -0.0170333410 -0.0039904594 0.0051391103 0.0061281923 0.0016534579 0.0028746205 0.0064185393 0.0934607256 -0.0813282005 0.1343013998 -0.0280080096 0.0058149512 -0.0597586335 -0.0376014189 0.0140550494 -0.0842361255 0.0386190245 -0.0184493683 0.0972258598 0.0472762798 -0.0092810541 0.0863206274 -0.0099608991 -0.0025150237 -0.0185380042 -0.0002566428 0.0040905612 -0.0136964842 -0.2321948889 0.0795566935 -0.5239253716 -0.2012801043 0.1123384827 -0.4517300065 0.0424773177 -0.0165229838 0.1053809770 0.0290672379 -0.0042081542 0.0567905720 0.2140162515 -0.0680545273 0.5118029574 -0.0001641796 -0.0003890010 0.0001038210 -0.0001929155 -0.0003037239 0.0001249006 0.0001173882 -0.0000659112 0.0000623673 0.0008465079 0.0002457624 -0.0028738734 0.0018211875 -0.0044298190 -0.0001854427 -0.0006440786 0.0011632043 -0.0002160161 0.0019435709 -0.0005051324 0.0031167804 -0.0010434083 0.0000489736 -0.0025441083 0.0000737578 0.0004230526 -0.0018162594 -0.0015752304 0.0006968511 -0.0017619969 -0.0003421592 0.0007364803 0.0002223446 -0.0001133466 0.0010513870 0.0001668714 0.0051249757 -0.0048630207 0.0024378701 -0.0053359326 0.0067319807 0.0022897680 -0.0032779344 0.0066023280 0.0013212206 0.0024454899 0.0018143492 -0.0015141101 0.0035533971 -0.0076656118 0.0068006556 -0.0012136914 0.0093406132 -0.0086793050 0.0006316684 0.0042617277 0.0058919651 0.0019144537 -0.0062610621 -0.0022713035 0.0028107396 -0.0067245029 -0.0040227118 0.0003307605 0.0037691918 0.0033466087 -0.0002194829 -0.0014327478 0.0006417539 -0.0012526994 0.0019901365 0.0013830459 -0.0008386251 -0.0002998412 0.0003832389 0.0005931100 0.0007211742 -0.0020533645 -0.0003981497 -0.0011695091 0.0000091595 -0.0009527312 0.0001657144 0.0002683237 0.0002021569 0.0001563337 0.0006544131 0.0006557331 0.0006044545 0.0006783544 -0.0030005333 -0.0080632253 0.0062737547 0.0030761171 -0.0003515404 -0.0041324764 -0.0005868255 0.0015685058 0.0001347257 0.0017858023 0.0015594630 -0.0000772770 0.0008169424 -0.0006571967 0.0010847606 -0.0000682317 0.0000490255 0.0002660018 -0.0002167063 0.0000347117 0.0003314637 -0.0001977517 -0.0002328418 -0.0001088304 0.0001082697 -0.0000276467 -0.0004486149 0.0001717749 0.0000915337 -0.0002131294 -0.0001376705 -0.0002123817 0.0003650210 0.0009902793 -0.0005760587 0.0016325281 -0.0003990743 0.0000177044 -0.0002183621 0.0008553367 -0.0002229962 -0.0004863794 0.0004894619 -0.0000251732 0.0000699339 0.0006704854 0.0003838975 0.0014742225 -0.0003639886 -0.0010586832 -0.0016892352 0.0003896893 -0.0001874194 -0.0004715208 -0.0001844343 0.0002024715 0.0005705309 0.0002274571 -0.0001705200 -0.0002757300 -0.0000726849 0.0000608725 0.0001408343 -0.0000457404 0.0002094182 0.0000421969 -0.0004001690 -0.0001285641 0.0002305678 0.0000946727 0.0000573483 -0.0003039919 -0.0006030224 -0.0003375031 -0.0006185532 -0.0000045048 0.0002753626 -0.0002064250 0.0001822345 -0.0001333746 -0.0000402194 -0.0000444672 0.0004729759 0.0002880915 0.0003504942 0.0001677691 0.0003092351 0.0000368089 0.0000470681 0.0000779664 0.0000532071 -0.0001049731 -0.0001094819 0.0000930355 0.0001691316 -0.0001285638 -0.0001467575 -0.0001621398 -0.0000582850 -0.0001257353 0.0003583671 0.0001689455 -0.0000280402 -0.0002421615 -0.0000930001 0.0000082808 0.0002221271 -0.0001150350 0.0000086653 -0.0000236230 0.0001999005 -0.0001103735 0.0001747024 -0.0002591903 0.0005161449 -0.0003266401 -0.0001394292 -0.0017008964 -0.0066512323 -0.0037929806 -0.0238625420 -0.0222168451 0.0086040814 0.0103648064 0.0150191991 0.0096424949 0.0045723755 0.0082344433 0.0056930515 -0.0027385734 0.0060811524 -0.0055238381 -0.0394533677 0.0094735503 0.0218046175 0.0309363997 -0.0166465168 0.0030256071 0.0005864827 -0.0110015835 0.0168651975 0.0005547816 -0.0005681021 0.0001407660 -0.0006145870 0.0004826145 -0.0004113647 0.0001066047 0.0005234760 -0.0001932482 0.0001425460 0.0004458888 0.0002088273 0.0000468265 -0.0004903259 -0.0000422380 0.0000508354 -0.0004528474 -0.0000246084 -0.0007010381 0.0003524523 -0.0008591641 -0.0000435325 0.0000042520 -0.0004341330 -0.0002098444 0.0002571654 0.0001238279 -0.0019824588 0.0001615280 -0.0009890946 -0.0008561015 0.0007385611 0.0004615550 -0.0003347623 -0.0001089773 0.0001519556 0.0017597432 -0.0010944932 0.0010045656 -0.0001332487 0.0003960768 -0.0001636725 -0.0023617730 0.0008483032 0.0000679987 0.0014362097 -0.0035686930 -0.0066178211 -0.1661968442 0.1046683873 -0.2890420485 0.0300315736 -0.0194192572 0.0505979109 0.0113342908 -0.0076599616 0.0150474108 -0.0540829355 0.0294930404 -0.0816931757 0.0400851587 -0.0232254056 0.0640229778 -0.0508409941 0.0311575823 -0.0759747758 0.0194592069 -0.0091602761 0.0273855372 0.2685067113 -0.1346012740 0.4609267770 -0.2448842595 0.1326466940 -0.4079418394 0.2820250822 -0.1494488421 0.4283467149 -0.0048143467 0.0006657601 -0.0082833385 0.0032080858 0.0020377847 0.0066321343 -0.0285388244 0.0309055899 -0.0417778579 -0.0028791027 0.0031373692 -0.0047942439 -0.0018504672 0.0013629428 -0.0049270176 0.0025788944 -0.0013925054 0.0058148390 0.0006072745 -0.0021763054 0.0055608490 -0.0017202862 -0.0028174000 -0.0009475153 0.0019497548 -0.0001303134 -0.0012341431 -0.0119334179 0.0037376341 -0.0292463143 -0.0140874939 0.0015357704 -0.0260303181 0.0039120089 -0.0054687592 0.0052370365 0.0022088833 -0.0004477361 -0.0007868084 0.0137934042 -0.0028247837 0.0291920542 -0.0022292361 -0.0009659238 -0.0056929006 -0.0092116927 0.0346121825 -0.0637967321 0.0008734899 -0.0002250132 0.0007255520 0.0003242945 0.0007930326 0.0031588869 -0.0015386148 0.0043333206 0.0025206182 0.0001068234 -0.0010578107 -0.0005545614 -0.0020439963 -0.0009277722 0.0007212481 0.0015649063 0.0007650241 -0.0006514300 0.0021120572 0.0007423283 -0.0002186035 0.0014116214 0.0006813716 -0.0006645460 0.0011745720 0.0004899096 -0.0001342373 0.0003343883 -0.0020208619 -0.0012592422 -0.0015273965 -0.0028327937 0.0011636045 0.0031054964 -0.0057621909 0.0025362170 -0.0058580544 0.0048824324 -0.0008006887 -0.0034209643 -0.0027349693 0.0016358988 0.0002417437 0.0030755930 -0.0091034151 -0.0036679875 -0.0006003392 0.0022568272 -0.0019689815 -0.0022262389 0.0002006741 -0.0007735644 0.0038812453 0.0053401026 -0.0019039504 -0.0035810319 -0.0031484760 0.0009245860 -0.0031948407 -0.0024981977 0.0005015564 -0.0018828400 -0.0013632323 0.0010891921 -0.0031719543 -0.0020374078 0.0001695134 -0.0003276258 0.0001457563 0.0001758266 0.0001887606 -0.0004404693 -0.0003330184 0.0002870015 -0.0006833645 0.0000234582 -0.0002755003 0.0001794979 -0.0001580599 0.0001345970 0.0003615565 -0.0000484671 0.0001427917 -0.0000318217 0.0005612880 -0.0032992451 0.0035192537 -0.0033276752 -0.0017125306 0.0033997955 -0.0000528792 0.0002629441 -0.0001112683 0.0000423462 0.0008406260 -0.0002462827 -0.0003018388 -0.0001095673 0.0003519238 -0.0000376807 -0.0007971067 -0.0017094381 0.0004123403 -0.0005945679 -0.0015386345 0.0012770629 0.0021366177 0.0004619285 0.0007320856 -0.0028372766 0.0022272254 -0.0022925770 0.0031215188 0.0003123767 -0.0027286468 0.0006011241 -0.0020564088 -0.0029150257 0.0005267832 -0.0053882928 0.0030957321 -0.0012312019 0.0010098921 -0.0154199388 0.0094298674 -0.0003547783 0.0068459270 -0.0155970768 0.0048507409 0.0000306289 0.0000048171 0.0001086299 -0.0000121996 -0.0001002452 -0.0000821896 -0.0024379547 0.0019144704 0.0032411021 0.0010147417 -0.0010001285 -0.0035057771 -0.0000559421 0.0000944624 0.0000292713 0.0001642323 -0.0000393283 -0.0001541798 -0.0001079072 -0.0004812939 0.0001229388 0.0001558739 0.0001008981 -0.0000363637 -0.0002835734 -0.0003296119 0.0005448582 0.0000402235 0.0001566956 -0.0002535833 -0.0000020765 -0.0002604554 0.0000979436 -0.0002564111 0.0003106957 0.0000013247 0.0004408706 -0.0002411609 0.0001874702 -0.0003032837 0.0002006339 -0.0005190751 -0.0003110574 0.0000963954 -0.0007419053 -0.0002084406 -0.0001823470 0.0000345077 0.0000926937 0.0001518057 0.0001138863 0.0004662690 0.0005252551 0.0003285668 0.0003997963 0.0002083603 0.0002342877 0.0005408414 0.0003468551 0.0005856418 0.0000100737 -0.0006482020 0.0004512625 0.0000129731 0.0000047152 -0.0000714439 0.0001017412 -0.0004739796 0.0008922880 -0.0002571866 0.0001549016 0.0001486145 0.0006954017 0.0001664635 -0.0002783978 0.0003673138 0.0007585424 -0.0005083718 -0.0009492483 -0.0023362005 -0.0049236560 -0.0024359971 -0.0077812569 -0.0056063803 0.0012774997 -0.0019564047 0.0027057880 0.0188417803 -0.0032859676 -0.0103237043 -0.0109553592 0.0034725855 -0.0039229498 -0.0030888787 0.0010074521 -0.0012954476 -0.0824399531 0.0880425704 -0.0386358585 0.1427877638 -0.1482107884 -0.0787304718 0.0183760777 -0.0872738047 0.0572265309 -0.1522154686 -0.1542707651 0.0268342339 -0.0269251699 0.0908948862 -0.0285864040 0.0215206757 0.0981755959 -0.0135032696 0.1073322903 -0.1175539077 0.1422154071 -0.0605319940 -0.0730342126 0.0567257804 0.0907882190 0.0864111654 -0.0005893653 -0.0262329605 -0.1891909650 -0.1186269253 -0.0877458534 0.0163403601 -0.0711590785 0.1039224320 0.0347472589 0.0052319178 0.0055345186 -0.0254356965 -0.0052435866 0.0000211732 -0.0046569665 -0.0051268560 0.0086431558 -0.0057430259 0.0031318341 0.0051568681 -0.0018488218 0.0031394368 -0.0009779788 0.0019802506 -0.0005158555 -0.0005341862 0.0009135787 0.0013210322 0.0004911788 0.0006628778 0.0006622184 -0.0001244126 0.0010598299 -0.0023718009 -0.0000680483 -0.0022997266 0.0013053294 0.0009409036 0.0009131377 -0.0021092207 0.0004348968 -0.0013977244 0.0007339168 0.0071730242 0.0002183070 0.0112528623 -0.0059892095 0.0008540811 -0.0072067503 0.0063617667 -0.0007310685 0.0067663436 -0.0009520263 0.0015665307 0.0002354770 -0.0003209147 -0.0014657618 0.0007980641 -0.0006962387 -0.0009785016 -0.0032069079 -0.0002223684 -0.0002668898 -0.0003745462 -0.0001681436 -0.0002108512 -0.0001206160 0.0003592760 0.0003170556 -0.0001439161 0.0001080228 0.0001535004 -0.0000990658 0.0000967267 0.0006403790 -0.0005052559 -0.0000568853 -0.0001132891 0.0007868489 0.0009840695 -0.0000130541 -0.0002552659 0.0011146345 -0.0006085453 0.0020582173 0.0013520789 0.0004422446 0.0029823979 -0.0019300114 0.0001910085 -0.0037128847 0.0000248256 -0.0005570438 0.0012176558 -0.0020397885 -0.0010532976 -0.0026849431 0.0039668062 -0.0028549703 0.0575294667 0.0647248482 0.0162556660 0.0213788092 -0.0028239085 -0.0015060508 -0.0015792383 0.0032748066 0.0009591277 -0.0003195468 0.0054469010 0.0031139066 0.0000506166 -0.0014524038 -0.0005080732 -0.0005459007 0.0002223908 0.0003321668 0.0005632554 0.0002248769 0.0008240451 0.0000937205 -0.0001629202 -0.0002789581 0.0003033814 -0.0044122250 -0.0033620353 0.0001000111 -0.0015237944 0.0030506056 0.0024515939 -0.0024784457 0.0007985222 -0.0003715680 0.0013682666 -0.0020472655 -0.0001890078 -0.0002424631 -0.0020354705 -0.0013586670 -0.0087337265 -0.0047518739 0.0055424119 0.0005610443 -0.0002936774 -0.0026949680 -0.0002897187 -0.0013153252 0.0018648286 0.0002819426 0.0001627596 -0.0000853478 -0.0003677347 0.0002991072 -0.0005444525 -0.0000864904 0.0021175909 0.0014216013 0.0032740238 -0.0008871850 -0.0013181773 0.0005320204 0.0120164465 0.0066359387 0.0030931478 -0.0003338537 -0.0018244440 -0.0731092164 0.0049676976 0.0222342169 0.0127381056 0.0168391626 0.0162575340 0.0571474478 0.0280223937 0.0479857216 -0.0130679896 -0.0013604101 0.0056591564 0.0241929044 -0.0505029708 -0.0592815841 -0.0024303555 -0.0150638413 -0.0239360956 0.0108600120 0.0016341796 0.0381472958 0.0728483021 -0.0440857491 0.0720155019 0.0112872271 0.0013178266 -0.0041125698 0.0545052045 -0.1049762768 -0.0002153526 -0.0037324201 -0.0392227810 -0.0206523237 -0.0170950731 0.0013085331 0.0282109931 -0.0676407421 -0.0127458246 0.0497552187 0.0139798540 0.0014258665 0.0036021410 -0.0080957629 -0.0156811823 -0.0754147152 0.0039473347 -0.0024911613 -0.0196089200 -0.0200079321 -0.0151886225 0.0401150065 -0.0878376308 -0.0759294038 0.0150414612 -0.0104434566 -0.0023763820 -0.0048146450 -0.0101946694 -0.0878637637 -0.0549742572 0.0021945868 -0.0021287248 -0.0283144850 -0.0058283026 -0.0070404577 -0.0109306064 0.0003076884 0.0064710353 0.0123866117 0.0089145738 -0.0033119355 -0.0096428230 -0.0053305499 0.0046719126 0.0128842367 0.0214722793 -0.0165226469 -0.0194883006 -0.1417486690 -0.0372414459 0.0629916180 0.0380872743 0.2096188706 -0.0684006515 -0.0900098764 -0.0411832350 0.0286906162 0.1672157392 0.1667071685 -0.1808799123 -0.0668515244 -0.0664431204 0.0461610147 0.0227342842 0.0954501476 -0.0405352301 0.1552687225 -0.1260820533 0.0061526528 -0.0379786343 0.0886491784 -0.0508370208 0.1777280237 -0.0912221833 0.0950064737 0.0539363329 -0.0029669930 0.1471558296 0.0100861814 -0.0301280339 -0.0334164408 0.0083785577 0.0846311988 -0.0620473076 -0.1022711225 -0.1478021514 -0.0774262640 0.0429101050 0.0950243726 -0.0188874530 -0.1986560012 -0.1022325351 -0.0241327292 0.0024514325 0.1901011847 -0.1070912832 0.0428931221 -0.0202922024 0.0901309991 0.0060475298 0.1105424611 -0.2704721802 0.0508145508 -0.0643404229 0.0696761165 -0.0026919211 0.0080652272 -0.0034517206 0.0184312164 -0.0055915052 0.0059691008 -0.0190904684 -0.0291041279 0.0104430718 0.0404289506 0.0181605556 -0.0040000559 0.0001911873 -0.0126027814 0.0036343497 0.0347160679 0.0102110001 -0.0124051481 -0.0474659534 0.0353566690 0.0125103431 0.0393134873 0.0037602601 -0.0265817557 -0.0035611595 0.0038787593 -0.0015048169 0.0072361451 -0.0042053094 -0.0012518443 0.0002804385 -0.0026895430 0.0015295874 -0.0004919878 -0.0031272547 -0.0005504167 0.0010973191 0.0030265708 -0.0008073451 0.0010424267 0.0017364679 0.0006439690 0.0032073915 -0.0024885850 0.0055024354 -0.0011426399 -0.0012708416 0.0008544453 0.0006135284 0.0004751361 0.0001150006 0.0006707691 -0.0028180625 -0.0009938844 -0.0024585225 0.0005558090 -0.0038469808 0.0004953460 0.0003209196 -0.0000067722 0.0011850815 -0.0002137442 -0.0006462002 -0.0022039505 -0.0012821918 0.0012692902 -0.0002974076 -0.0005169691 0.0025007846 -0.0089554045 0.0043125549 -0.0103108566 -0.0043213213 0.0017878329 -0.0055767736 0.0004376473 -0.0003353753 0.0012571533 -0.0016496418 -0.0003078908 -0.0017630518 -0.0016317571 -0.0000167524 -0.0009128147 0.0011733641 0.0014478118 0.0006963565 -0.0006650971 -0.0003805926 -0.0004835500 0.0003125989 -0.0008409313 0.0013403610 0.0030802083 -0.0059050449 0.0054856021 -0.0008479315 0.0028026914 -0.0049058629 0.0010742570 -0.0031828635 0.0009309550 0.0021797118 -0.0014537411 0.0006330151 0.0011316915 0.0031134381 -0.0022840074 0.0089451143 -0.0039828415 0.0117176856 0.0019807030 -0.0005542424 0.0028047555 0.0026201957 -0.0017956525 0.0042679812 -0.0009571070 0.0015008744 -0.0028443701 -0.0031570505 0.0005346192 -0.0038947001 0.0010364179 -0.0001858096 0.0023471738 -0.0013420533 0.0000925112 -0.0030360437 0.0056188747 -0.0001756721 0.0222827937 0.0082883865 -0.0059474985 0.0210343940 -0.0065526857 0.0020189338 -0.0136445032 0.0068464925 -0.0032058871 0.0164012301 -0.0110032803 0.0023762253 -0.0274697038 0.0009978517 0.0009887703 0.0019003781 -0.0042916398 0.0060693120 -0.0524297225 0.0007096921 -0.0005418118 0.0003499962 0.0292397958 0.0113052724 0.0080998676 -0.0255200362 -0.0095961336 0.0019651913 -0.0371236479 -0.0206112852 0.0011605912 0.0117367789 0.0056416609 0.0004735527 -0.0026745180 0.0005114932 0.0010381963 -0.0018205822 -0.0015397155 -0.0017484632 0.0002487984 -0.0010932358 0.0008355662 0.0308608756 0.0246089323 -0.0008113664 0.0110884149 -0.0219250972 -0.0176722557 0.0006261206 0.0066231252 -0.0017488637 -0.0054679975 0.0127287189 -0.0044946893 0.0139498065 -0.0180552694 -0.0061112945 0.0053541539 0.0039478142 0.0069019652 0.0008590386 -0.0003408245 0.0193690941 0.0055167119 0.0050121996 -0.0084801462 0.0014548180 -0.0023120781 -0.0065105295 0.0013701547 -0.0019953591 -0.0050300786 0.0009888993 0.0017498556 0.0016352001 -0.0243963963 0.0069350425 0.0099018091 -0.0037177296 -0.0864617315 -0.0478792401 -0.0223847483 0.0013002775 0.0133539770 -0.0031926156 0.0004869485 0.0007207692 0.0004454551 0.0005857562 0.0009568866 0.0026030481 0.0015745132 0.0019394498 -0.0003095661 -0.0002350447 0.0002723159 0.0010390358 -0.0022603494 -0.0027272715 -0.0001859582 -0.0006520409 -0.0012123252 0.0018906534 0.0008826746 0.0014788127 0.0016226853 -0.0022209312 0.0051116982 0.0005296875 0.0000390814 -0.0002007636 0.0018060722 -0.0049724300 -0.0000305460 -0.0005801398 -0.0023509201 -0.0004760096 -0.0007746955 0.0012214147 -0.0000741677 0.0004483939 -0.0010686706 0.0001866492 -0.0002843039 0.0003492222 -0.0001745611 0.0002961393 -0.0008420124 -0.0002714798 0.0001377712 0.0005660390 -0.0003716769 0.0003402284 -0.0080231214 0.0030192269 0.0038301474 -0.0050884684 0.0029511749 -0.0001086462 -0.0009683207 0.0005527796 -0.0015478799 0.0022717853 -0.0011809008 0.0009355602 -0.0009707311 -0.0000613663 -0.0003646147 -0.0004115756 -0.0006828803 0.0000455245 0.0004017536 0.0008006318 0.0002078564 -0.0000726180 -0.0006778075 0.0001653768 0.0006781874 0.0000895822 0.0006587361 -0.0010326101 -0.0001740781 -0.0008931135 0.0000385089 0.0007763945 0.0006742827 0.0032491990 -0.0007775546 -0.0015228241 -0.0009633740 0.0004072749 0.0021800989 0.0020078167 -0.0039307602 -0.0005363799 -0.0018217821 0.0020832762 -0.0000988950 0.0027407805 -0.0008700610 0.0015562814 -0.0018699132 -0.0000719068 -0.0027816524 0.0024478166 -0.0020339480 0.0012893408 -0.0018560893 0.0038434654 0.0024427983 -0.0005676760 0.0051192548 0.0003062246 -0.0002237324 -0.0006582463 -0.0001192893 0.0014850652 -0.0016162751 -0.0035207965 -0.0044245135 -0.0024686695 -0.0002599201 0.0016947892 -0.0008023423 -0.0048214961 -0.0033784744 -0.0027418970 0.0003252384 0.0053676712 -0.0032809048 0.0010877759 -0.0003252912 0.0022886929 -0.0008916988 0.0037700806 -0.0072530192 0.0017979664 -0.0008229226 0.0015751913 0.0293493539 -0.0802421392 0.0286031499 -0.1997728444 0.0408858405 -0.0524843026 0.1982444312 0.2955134462 -0.0934260546 -0.3852726267 -0.1612552588 0.0457187328 -0.0079501802 0.1122517326 -0.0329925342 -0.3285308903 -0.0779633395 0.1225547906 0.4212771076 -0.3185049860 -0.1085433922 -0.3412936936 -0.0386040524 0.2415053341 0.0006740133 -0.0010780842 0.0004683809 -0.0031842820 0.0005679302 0.0014681564 -0.0003422946 -0.0001965164 -0.0001209011 -0.0025527261 -0.0005674776 0.0008118499 -0.0006629460 0.0003322382 0.0001094527 -0.0005691157 0.0007751779 -0.0007715106 -0.0004016814 -0.0001874140 -0.0016336275 -0.0000371966 -0.0004316169 0.0001432679 0.0010996882 0.0015259813 0.0002133943 -0.0034955709 -0.0001244127 -0.0006458455 0.0021211979 -0.0013294302 0.0012697914 0.0021563355 0.0005805172 -0.0004993260 -0.0025045047 0.0011295789 -0.0018239000 0.0010296973 0.0006266588 -0.0020812918 0.0002878082 -0.0017124539 0.0033414158 -0.0786787642 0.0220267425 -0.2102374326 0.0315944905 -0.0174445994 0.0516671087 -0.0069427726 0.0018883184 -0.0092509370 0.0062440809 -0.0121735570 -0.0048653226 -0.0089088736 0.0012679231 0.0159437569 0.0076288399 0.0104130792 0.0025813296 0.0068827915 0.0054131897 0.0042401299 -0.0017094808 -0.0034432554 -0.0031854854 -0.0340559457 0.0252206105 -0.0199664160 -0.0056184652 0.0175833282 -0.0085532314 -0.0188411181 0.0501072057 -0.0237179541 0.0169889538 -0.0192872132 -0.0150252493 0.0085305157 0.0151217459 0.0389698368 -0.3424667914 0.3342179567 -0.4334780001 -0.0119143064 0.0293447825 -0.0126677543 0.0015128704 -0.0002546018 -0.0180726844 0.0085462834 0.0025907264 0.0101285508 -0.0201207505 -0.0155847606 0.0196837183 -0.0111511494 -0.0221202297 -0.0002507949 0.0182330762 -0.0053988890 -0.0014135324 -0.0062312343 0.0056476422 -0.0518242330 -0.0612590205 -0.0384748598 -0.0675222063 0.0164963525 -0.0396456252 0.0057267605 0.0005835896 0.0009142478 -0.0462779670 0.0511422711 -0.0090685686 0.0740354952 0.0022943644 0.0004698100 -0.0000159838 0.0015063039 -0.0083030843 0.0530332574 0.0010193963 0.0000543156 -0.0001426987 -0.0267803294 0.0413290572 0.0238434914 -0.0639613681 0.0245884977 0.0338983820 -0.0790687309 -0.0541444622 -0.0082115601 0.0073059714 0.0031126249 0.0074310482 0.0081457075 0.0011831788 -0.0052583460 0.0124994323 0.0026533361 -0.0056201720 0.0103290753 0.0047209050 -0.0041747441 0.0629867788 0.0542540622 0.0043325316 0.0233567018 -0.0646362911 -0.0461158811 -0.0024216571 -0.0180057051 0.0059597130 0.0077449101 -0.0135823946 0.0144167138 -0.0328918102 0.0362204954 0.0020095015 -0.0163440232 -0.0145609655 0.0141326715 0.0038336031 0.0257889394 -0.0237347920 -0.0197496666 0.0040208244 0.0017313201 -0.0118001452 -0.0168552145 -0.0041064493 -0.0015787271 0.0220339698 0.0307586649 -0.0110793864 -0.0277248491 -0.0233408271 -0.0352345604 -0.0254192116 -0.0106326821 -0.0009950191 -0.1733214475 -0.1001653252 -0.0298493948 -0.0279326599 0.0029594621 0.0012197054 -0.0004962314 -0.0002459659 -0.0004905735 -0.0003860724 0.0007885607 -0.0004844462 0.0000812884 -0.0008495953 0.0000861281 -0.0003864367 0.0001822692 -0.0002369742 0.0013105746 0.0005743090 0.0000228475 0.0000401691 0.0000806808 -0.0011990321 0.0041521965 -0.0045492826 0.0011246845 -0.0036921613 -0.0008020939 0.0001930411 0.0002208023 -0.0004300905 -0.0030001507 -0.0018987100 0.0028357437 0.0005971200 -0.0008408636 0.0000312582 -0.0009516714 0.0022041546 0.0015141367 0.0006507893 -0.0021310602 -0.0006620422 0.0010434982 0.0013950933 0.0006160397 -0.0012570843 0.0005870571 0.0014617174 0.0005679521 -0.0006225121 -0.0012935961 0.0048052526 -0.0051519826 0.0041240298 -0.0161355271 0.0068647489 -0.0182549879 0.0001739048 -0.0011314443 0.0008158695 -0.0047927171 -0.0057119879 0.0040862804 -0.0027280435 -0.0004125718 -0.0049499862 -0.0001115545 -0.0000518832 -0.0001693669 0.0001590861 0.0001252742 0.0003850967 -0.0007789713 0.0005517325 0.0004936574 0.0005272688 0.0000457210 -0.0012618824 -0.0003796015 0.0003436020 -0.0000519830 -0.0023869991 -0.0009248337 0.0006816456 0.0003764971 0.0019036804 -0.0005670355 -0.0002405744 0.0000364469 -0.0002572026 0.0011154598 0.0013542201 -0.0021304042 -0.0000656488 0.0012064933 0.0014196445 0.0004606977 -0.0001760045 0.0002001063 0.0018613907 -0.0013154132 0.0000570614 0.0008000625 -0.0006993725 -0.0007801303 0.0023784984 -0.0006966295 0.0005067152 -0.0007036934 0.0002576115 -0.0013517475 0.0000708674 -0.0005267931 -0.0000978937 -0.0007549028 0.0007693913 0.0006371366 0.0015081415 0.0003230273 -0.0000073210 0.0060784276 -0.0020405693 -0.0028591546 -0.0042959092 0.0028224884 0.0043701074 -0.0012159509 -0.0001942228 0.0011222344 0.0008181399 -0.0005531690 -0.0007889791 0.0059372630 -0.0038598435 -0.0029996979 -0.0059722149 0.0024439337 0.0035512973 -0.0153603637 0.0285895235 0.0619294487 0.2571884905 0.2148524737 -0.0966629027 -0.1341253825 -0.1573863583 -0.1120677206 -0.0690769093 -0.1758186826 -0.0764344273 0.0764926072 -0.0222833762 0.0241622093 0.2735148568 -0.1587535929 -0.1676757524 -0.0289348191 -0.0294355727 -0.1078928479 -0.1446293429 0.0702305496 -0.0572536717 0.0157094932 -0.0198756768 0.0093687786 -0.0501801396 0.0200659459 0.0385671911 -0.0041270838 -0.0005549306 -0.0083650014 -0.0266411177 -0.0037341848 0.0079267670 -0.0024815071 -0.0027835745 0.0004710047 -0.0017602698 -0.0001179947 -0.0011030272 -0.0174302032 0.0081719917 -0.0234937876 -0.0239299248 0.0157203937 0.0157666858 0.0162801277 0.0112333922 -0.0054431075 0.0838138705 -0.0820154714 -0.1025160159 0.0164290258 -0.0061724948 0.0149537715 0.0214073570 0.0112999377 0.0001186936 -0.0020361858 -0.0005997852 -0.0003919291 -0.0014967651 -0.0004183188 -0.0013274055 -0.0038613811 0.0002278046 0.0030282889 -0.0048853918 0.0018272222 0.0066601165 -0.0083533188 0.0041276289 -0.0162689089 0.0026040972 -0.0021726277 0.0016271503 -0.0006604084 -0.0012307373 -0.0004418836 -0.0022924118 -0.0015701216 0.0009624403 0.0005984903 0.0046930509 -0.0029806961 -0.0020204497 -0.0016051404 0.0024639244 -0.0001415853 0.0022372579 -0.0005552619 -0.0013222217 -0.0122037317 -0.0020073562 0.0144420426 -0.0024303750 0.0154942205 -0.0074483730 -0.0037082848 -0.0080832860 0.0006578046 -0.0019177937 -0.0006701155 0.0006070252 0.0015507695 -0.0017812242 0.0070012062 -0.0044316635 0.0119094586 0.0005969644 -0.0001352901 0.0006445468 0.0001053076 0.0004902442 0.0003926742 -0.0006713689 -0.0007734397 0.0002317802 0.0001274667 0.0001840182 -0.0005846396 -0.0000040503 -0.0005442825 0.0004762203 -0.0003678960 0.0002908115 -0.0005866232 -0.0014318739 -0.0004631597 -0.0006714231 0.0012019328 0.0021087900 0.0017850048 -0.0007671555 -0.0005527147 -0.0027525236 0.0015651923 0.0004700854 0.0041712206 0.0000733204 0.0013856509 -0.0022168666 0.0015666340 0.0011365690 0.0057510484 -0.0094745265 0.0153639765 -0.1477518104 0.0128951933 0.0047083239 0.0033629011 0.0005106354 0.0001700827 0.0000100310 0.0004111017 -0.0001520755 -0.0002105449 0.0002510683 0.0001120586 0.0000532872 -0.0002974851 -0.0002136156 -0.0003881470 -0.0001513240 0.0005739867 0.0003092889 -0.0000766693 0.0001953471 0.0006395986 0.0002819677 0.0000581153 0.0001143635 -0.0001483254 -0.0002254841 -0.0000362510 -0.0000702565 0.0002863192 0.0001772282 -0.0006273312 0.0004889677 0.0003699684 0.0012902872 -0.0022580151 -0.0005195305 0.0014697007 -0.0027068768 -0.0014054673 0.0005074937 0.0004627474 -0.0007217824 -0.0004375815 0.0003166254 -0.0030468064 -0.0000209808 -0.0011730542 0.0015411921 -0.0002846731 -0.0005563100 -0.0004562621 -0.0002173157 0.0009417068 0.0007679869 -0.0004399905 0.0000716651 -0.0000185492 0.0000927445 0.0002919056 0.0002172959 -0.0000533020 0.0004411236 0.0002499614 -0.0000067811 0.0004036895 0.0000972785 0.0181379973 -0.0038865641 -0.0032850806 -0.0024380436 -0.0024629194 0.0016235233 -0.0130091790 -0.0047006758 -0.0160545062 0.0034004956 -0.0009289002 -0.0005048706 -0.0053953188 0.0123912893 0.0164162426 -0.0007731528 0.0018369398 -0.0006228270 0.0098009461 0.0104938901 -0.0091742415 -0.0222484500 -0.0135302735 -0.0035789029 -0.0019415642 0.0003730520 0.0005198552 -0.0020305656 0.0282799618 0.0034371781 -0.0021662097 -0.0049765631 0.0050602435 -0.0048858667 0.0053180264 0.0006267730 -0.0094296682 -0.0109282336 0.0124520558 0.0004137438 0.0051517463 -0.0010483086 0.0041167482 -0.0112994964 -0.0111080594 -0.0045636440 0.0061950486 -0.0010957826 0.0178911577 -0.0309196880 0.0128161753 -0.0401808311 0.0390413457 -0.0090310094 -0.0003941468 -0.0031281048 0.0007615332 -0.0163318632 0.0419687258 -0.0277315473 0.0173206760 -0.0367856785 0.0095573338 0.0010274024 0.0013866696 0.0024012656 -0.0003124590 -0.0014379538 -0.0025630200 0.0010438864 -0.0002405711 -0.0021252816 -0.0009219261 0.0013381364 0.0018241127 -0.0029684578 0.0085174703 0.0048529020 -0.0232186474 -0.0077901032 0.0114690703 -0.0005953614 0.0054481150 -0.0281899037 0.0003584224 0.0064251195 0.0181560000 0.0346286639 0.0614068947 0.1118087546 -0.0205013163 -0.0342814239 -0.0990903120 0.0013558858 -0.0106988641 -0.0172607306 0.0178775461 -0.0047328483 0.0131329034 0.0480898666 0.0340142998 0.1098817364 0.0076253580 -0.0308061167 -0.0775388622 0.0004027388 -0.0024648418 -0.0345376062 0.0181303200 -0.0195013049 -0.0159706599 -0.0639910018 0.0306946125 0.0488791119 0.0579480873 -0.0098558117 -0.0221417410 0.4162563124 -0.1760365223 -0.2020663845 -0.2625785625 0.1433197924 0.1857091642 -0.0759270250 0.0244187911 0.0631600361 0.0536686763 -0.0265134629 -0.0469945517 0.4287537753 -0.2333622100 -0.2341433008 -0.3325522295 0.1752260165 0.2034809834 -0.0005723967 -0.0005208822 -0.0009597512 -0.0035890973 -0.0040901178 0.0019073803 0.0000592687 -0.0001121397 0.0024299271 0.0019748226 0.0028149016 0.0010114994 -0.0002472145 0.0006147181 -0.0002073206 -0.0025984474 0.0005099465 0.0013614333 0.0032129979 -0.0021423790 0.0000633751 -0.0017781363 -0.0001363344 0.0012075662 0.0197469835 -0.0256681933 0.0117976223 -0.0718712690 0.0169145627 0.0294458543 -0.0057783204 -0.0005241121 -0.0063659358 -0.0448217426 -0.0092290796 0.0235247470 -0.0049479640 -0.0029904664 -0.0036551856 -0.0102489385 0.0029297764 0.0025956726 -0.0174390574 -0.0034374851 -0.0477948659 -0.0013126884 -0.0034615073 0.0069542680 0.0318323201 0.0235355730 -0.0052884954 -0.0322050298 -0.0244663723 -0.0401262349 0.0251728600 -0.0076782852 0.0224648278 0.0354566060 0.0189805923 0.0010756894 -0.0022011214 -0.0025974818 -0.0015023763 -0.0019672102 0.0008642423 -0.0038486211 -0.0066014930 -0.0006473665 0.0094167636 -0.0123672631 0.0055132565 0.0090662293 0.0448869960 -0.0214516809 0.0673405404 -0.0064854888 0.0033221020 -0.0129565156 -0.0008034526 -0.0024633256 -0.0019897965 -0.0004196687 -0.0060894479 0.0103427933 0.0130326886 0.0024689552 0.0119992763 -0.0087957325 0.0000728791 -0.0038587814 0.0010378170 0.0033830980 -0.0007563107 -0.0342728755 -0.0150110522 -0.0579129055 -0.0359692213 0.0306641147 -0.0843291096 0.0201869812 -0.0244802918 0.0360259306 0.0010030987 -0.0030606208 -0.0016564432 0.0016657220 0.0028279991 -0.0015879734 0.0041381716 0.0003344961 0.0091904487 0.0006211109 0.0005031382 0.0005197011 0.0004297951 0.0003888527 0.0000575732 -0.0006015643 -0.0009473533 0.0007896051 -0.0006661127 -0.0000056598 -0.0003578170 -0.0001700345 -0.0014829943 0.0009214172 -0.0003486324 0.0004074181 -0.0011342477 -0.0025499354 -0.0002620151 -0.0035003773 0.0002164983 0.0030938572 0.0017396071 -0.0013526368 -0.0017526626 -0.0054222745 0.0028863367 0.0010084990 0.0067371761 0.0018196442 0.0018031472 -0.0021615359 0.0024905273 0.0016650271 0.0113548877 -0.0193121103 0.0288081100 -0.2845212416 0.0068256218 0.0297513331 -0.0007625070 0.0002094294 0.0001856658 0.0007532865 -0.0003730974 -0.0002138437 0.0000279261 -0.0006795880 -0.0003137086 -0.0000201038 0.0002249707 -0.0005963389 0.0000244102 -0.0001851586 0.0003816121 0.0000228609 -0.0004421162 0.0007173849 0.0007527024 0.0000430137 0.0005332331 -0.0003205675 0.0006016507 0.0005386881 0.0000887797 0.0002340359 -0.0005661842 -0.0004496273 -0.0010077234 0.0006336337 -0.0001721224 -0.0003322565 0.0005738659 0.0001532454 0.0000214241 -0.0005261615 -0.0005932658 0.0013400356 0.0016194879 -0.0025880994 -0.0005693653 -0.0004265651 -0.0052456707 0.0012870386 -0.0020329287 0.0020916178 -0.0002827488 0.0007305801 0.0017429760 0.0000755130 0.0002315614 0.0013679864 0.0000775552 -0.0017597403 -0.0012642077 -0.0004319375 0.0002080384 0.0003475096 -0.0000601498 -0.0018768313 -0.0010185262 -0.0005261067 0.0002092580 0.0002475344 0.0244749065 -0.0049767945 -0.0048694764 -0.0037717735 -0.0041114867 0.0056234437 -0.0164490758 -0.0044242482 -0.0247495265 0.0048687426 -0.0026381892 0.0001471506 -0.0062271943 0.0189466123 0.0216021448 -0.0022926484 0.0002496697 -0.0011314752 0.0232772443 0.0256630567 -0.0184786785 -0.0340824501 -0.0355599917 0.0068163842 -0.0028166823 0.0013761609 0.0002836083 -0.0039013102 0.0287665766 0.0147942020 0.0018598968 -0.0031394350 -0.0019003325 0.0103651394 -0.0304043573 0.0160639740 -0.0351081392 0.0352117971 -0.0027790786 0.0149167159 -0.0347325304 0.0080478106 -0.0503182155 0.0851328579 -0.0442251266 0.0465010650 -0.0850303010 0.0195398331 -0.1042883797 0.1553600049 -0.0402862927 0.0914102284 -0.2579076741 0.0687524189 -0.0057042501 0.0201895678 -0.0085556413 0.2189071157 -0.5421266870 0.1394248790 -0.2294887933 0.4648929369 -0.1256726985 0.0014056204 0.0019480178 0.0036953210 -0.0006421581 -0.0022738640 -0.0037359889 0.0028521881 -0.0016454516 0.0046477105 -0.0002419695 -0.0041665306 0.0021892462 -0.0057178089 0.0095879702 0.0037349706 -0.0429833171 -0.0180797813 0.0138160472 0.0031127070 0.0242553071 -0.0307592609 -0.0025521861 0.0055026851 0.0155960195 0.0418780088 0.0682876216 0.0775811711 -0.0203813980 -0.0246995114 -0.0822393250 0.0047115859 -0.0074281393 -0.0132916790 0.0332456066 -0.0175158731 0.0107375555 0.0477972761 0.0233600926 0.0783788946 0.0288500772 -0.0338745489 -0.0541694910 -0.0283695531 0.0111025985 -0.0397178384 -0.0048277050 -0.0044561825 -0.0001534166 0.0150934108 -0.0016784370 -0.0028184173 0.0197694001 0.0299571760 0.0201565215 -0.0475372734 0.0358772892 0.0458012894 0.0532669687 0.0099492354 0.0098107074 0.0092033489 -0.0351142052 0.0096673097 -0.0154308071 0.0027880860 0.0037196954 -0.0687373452 0.0137626426 0.0762389893 0.0585394324 -0.0510298150 -0.0455820287 -0.0004098384 -0.0001754636 -0.0008021986 -0.0021457375 -0.0033395709 0.0017239186 -0.0003448264 -0.0006278302 0.0016371063 0.0018871069 0.0016907116 0.0000997350 0.0000153690 0.0017766150 -0.0005877529 -0.0040725202 -0.0041527645 0.0000019025 0.0031613003 -0.0014273978 -0.0010890918 -0.0010480831 -0.0021681643 0.0047104213 -0.0271746876 0.0351320846 -0.0166494244 0.0993625270 -0.0266876079 -0.0496584429 0.0081171765 0.0016100000 0.0105808593 0.0645291849 0.0147753901 -0.0306539295 0.0081948638 0.0028840061 0.0043335714 0.0076226177 -0.0093009543 0.0051479285 0.0200592066 0.0029478760 0.0622636212 -0.0045832863 0.0183385617 0.0166885091 -0.0235350410 -0.0498871976 -0.0065655464 0.1601412909 -0.0170487945 0.0240727756 -0.0369906999 0.0143252409 -0.0357470904 -0.0500343973 -0.0254124966 -0.0005921595 0.0026078462 0.0025936926 0.0002898628 0.0032157961 -0.0000618835 0.0047751614 0.0101986495 0.0002297055 -0.0113277306 0.0153521427 -0.0055666103 -0.0179055422 0.0638676527 -0.0343950815 0.1148531244 -0.0151161556 0.0109768235 -0.0156267039 0.0017430375 0.0039484776 0.0007287077 0.0097449378 0.0027462612 0.0026219269 0.0054883255 -0.0179738985 0.0197498467 0.0030861191 0.0065065353 -0.0121876706 0.0009571567 -0.0071915071 0.0019232326 -0.0165531391 0.0442637879 -0.0286263990 -0.0828820184 0.0293419365 -0.1174367084 0.0423398066 -0.0000309717 0.0541153184 -0.0024226773 0.0061477924 0.0019666494 -0.0016883917 -0.0049224665 0.0054144618 -0.0178248234 0.0102739602 -0.0324009290 -0.0017978526 0.0000901310 -0.0019379625 -0.0003737456 -0.0015341728 -0.0010213243 0.0018599585 0.0023346951 -0.0010009679 -0.0000438621 -0.0004061360 0.0017807512 0.0000613605 0.0018251849 -0.0015639380 0.0010687289 -0.0008271289 0.0019611949 0.0047039254 0.0013151785 0.0040382889 -0.0034746552 -0.0052826127 -0.0057787738 0.0024651942 0.0018945082 0.0087483421 -0.0051388359 -0.0012991534 -0.0132788304 -0.0007293302 -0.0041998057 0.0061452926 -0.0040026567 -0.0034362480 -0.0172554890 0.0278258104 -0.0466354418 0.4498463306 -0.0460812967 0.0041675017 -0.0186975740 0.0012155994 -0.0032397277 -0.0019067032 0.0036600551 0.0015669148 -0.0006733841 0.0061011503 0.0033020111 0.0002418525 -0.0009487442 0.0001134380 0.0003933497 0.0001318620 -0.0010112036 -0.0004439951 0.0001033285 -0.0007311357 -0.0012853005 -0.0007446971 -0.0004301113 0.0000982865 -0.0042957875 -0.0039189557 -0.0004892516 -0.0018398512 0.0036700577 0.0029052704 0.0020991502 -0.0012406442 0.0001179458 -0.0019099440 0.0028507281 0.0008819897 -0.0008587529 0.0028540774 0.0020900196 -0.0009449401 -0.0013532491 0.0000011066 0.0009206292 -0.0001181414 0.0098215084 -0.0012006919 0.0032333989 -0.0035790851 0.0007145238 0.0008951097 0.0000116269 0.0001763501 -0.0019169123 -0.0023467091 0.0008125493 0.0013912215 0.0012374548 0.0037482540 -0.0010725720 -0.0016600030 0.0004597503 0.0136125808 0.0075536309 0.0036823157 -0.0007150299 -0.0021926225 -0.0344065942 0.0069344384 0.0068110410 0.0054386733 0.0058828285 -0.0095517613 0.0229049109 0.0054684845 0.0362288993 -0.0069519945 0.0042767832 -0.0006794614 0.0079186142 -0.0279329990 -0.0297972447 0.0040899177 0.0013940562 0.0019394998 -0.0382164552 -0.0412467717 0.0280863191 0.0500239084 0.0575532304 -0.0146042085 0.0039862933 -0.0023337551 -0.0002209104 0.0054103852 -0.0337741982 -0.0278298869 -0.0058083552 0.0011041605 0.0091889894 0.0115931586 -0.0186254440 0.0073153416 0.0243608864 0.0304228434 -0.0414623058 0.0012208528 -0.0260165405 0.0026149043 -0.0313547116 0.0745807316 0.0275879331 0.0357075396 -0.0592359659 0.0160236580 -0.0635979425 0.1061877530 -0.0343924062 0.1063291629 -0.1314026048 0.0077359007 0.0010096495 0.0143911287 -0.0033634020 0.1514461402 -0.3387745204 0.1512707006 -0.1637174050 0.3277955939 -0.0878577976 -0.0020109108 -0.0027564032 -0.0053651086 0.0010375099 0.0033408378 0.0054164758 -0.0028604877 0.0013583016 0.0091867188 0.0031336753 -0.0052668314 -0.0059544822 0.0079981734 -0.0136842337 -0.0068150305 0.0619829799 0.0252329200 -0.0220010862 -0.0037419309 -0.0326517136 0.0505921567 0.0029517831 -0.0100417495 -0.0287472276 -0.0663713573 -0.1121439759 -0.1458610926 0.0353942511 0.0494143252 0.1529358367 -0.0060916178 0.0118451984 0.0234427112 -0.0477562321 0.0251659483 -0.0163299212 -0.0766749264 -0.0424907872 -0.1353729760 -0.0402223322 0.0509952456 0.0821394626 0.0372884666 -0.0163315938 0.0489860222 0.0213188909 0.0072298368 -0.0022580454 -0.0356836631 -0.0005987500 0.0182316053 -0.0131284355 -0.0410032180 -0.0313076534 0.1460103504 -0.0976327733 -0.1059912410 -0.1279197180 0.0185019789 0.0279006869 -0.0304984741 0.0524119117 0.0010958476 0.0260331483 -0.0079208727 -0.0235858847 0.1846614835 -0.0697963138 -0.1549633779 -0.1496565595 0.1002331604 0.0906793538 0.0045637646 -0.0034055202 0.0007454601 -0.0109736236 0.0038361991 -0.0036934461 0.0169197207 0.0226737341 -0.0062456307 -0.0181525164 -0.0063974624 0.0026356446 -0.0046610465 0.0001558691 -0.0003374814 -0.0099673411 0.0069206634 0.0060892654 -0.0084828180 0.0073980915 0.0054244162 0.0090048457 -0.0032681536 0.0014883244 0.0064883060 -0.0094877439 0.0081926098 -0.0594841112 -0.0144593315 -0.0392850191 -0.0111158636 0.0026640035 0.0114310673 -0.0105726142 0.0033587022 0.0081483332 -0.0041614378 -0.0025376097 -0.0033512404 -0.0017229579 0.0002118052 0.0003977748 -0.0018212272 0.0009277473 -0.0102671897 -0.0015085388 0.0008961084 0.0000572344 0.0025931876 0.0030636046 -0.0003149806 -0.0022736882 -0.0048249872 -0.0096388155 0.0062822898 -0.0026366845 0.0042651131 0.0143474517 0.0090870290 0.0002472544 -0.0030056808 -0.0000688193 -0.0032040445 -0.0006131763 -0.0008363785 -0.0004731231 0.0012934366 -0.0010930975 0.0043235818 -0.0010694685 0.0006867780 -0.0010287548 -0.0022724237 0.0024397359 -0.0027149684 -0.0002969834 0.0007387490 0.0012305398 0.0000341806 0.0002817931 -0.0000643028 0.0001116984 0.0004659636 -0.0004511822 -0.0006334222 -0.0005651880 -0.0004266913 0.0014318052 0.0003194890 -0.0004723196 -0.0007344741 -0.0018484700 0.0000347801 0.0016013779 0.0010245217 0.0028186718 0.0010348085 -0.0014654342 0.0026337661 0.0004630776 0.0022089306 -0.0014812284 0.0002700590 0.0002027575 0.0000943115 -0.0001150225 0.0001229335 -0.0000960229 0.0004336741 -0.0003917192 0.0008210818 0.0000300219 -0.0000885991 -0.0003852148 0.0003518243 -0.0010681964 -0.0005767872 0.0018506748 0.0010340412 0.0017888021 -0.0017806244 -0.0000069201 -0.0001858041 0.0012818841 0.0000725242 0.0017637170 -0.0015786916 0.0001892768 -0.0019980835 -0.0029110763 0.0026030650 -0.0115309183 -0.0005314194 -0.0012973742 0.0027197353 -0.0035255696 0.0010194508 -0.0119401561 0.0044993130 -0.0028816461 0.0124571643 0.0010329716 -0.0011961451 0.0006406307 -0.0007831943 -0.0007729700 -0.0005409326 0.0013527217 0.0017751386 0.0164465291 0.0030453272 0.0007476331 0.0010216014 0.0005854811 -0.0006382362 -0.0003400831 0.0010734585 0.0005267295 -0.0001739501 0.0016117872 0.0007245077 0.0000786526 -0.0006243291 0.0002348982 -0.0003746841 0.0001053641 0.0000429843 0.0002076711 0.0000142225 -0.0008509831 0.0003200245 0.0001726560 -0.0002917217 0.0003001736 -0.0010644626 -0.0011412965 -0.0001636618 -0.0004741731 0.0010709646 0.0007739413 0.0000015704 -0.0000366101 0.0002859146 0.0008314403 -0.0013583699 -0.0002241707 0.0007615270 -0.0014946048 -0.0005965577 -0.0007581866 -0.0007864785 0.0024672342 -0.0000990038 0.0010457535 0.0016026021 -0.0013601427 0.0009745048 -0.0008008755 -0.0006468776 -0.0013584518 -0.0013827844 0.0000675750 0.0000165230 -0.0001383696 -0.0005982234 0.0018489263 0.0010499170 0.0010639550 -0.0001787417 -0.0004143841 0.0001189452 0.0035722058 0.0019764880 0.0008866890 -0.0000478631 -0.0005155535 0.0282969282 0.0090305247 -0.0204595881 -0.0193966038 -0.0281511070 0.0536097650 0.0062057746 0.0371494702 -0.0666785452 0.0064905604 -0.0314889166 0.0215616274 0.0227525845 0.0858571702 -0.0270166738 -0.0330334615 -0.0670231478 0.0370435375 0.1220751814 0.2392879479 -0.1902025021 -0.0878979289 -0.3410537741 0.2129548454 -0.0046696909 0.0198209396 -0.0111826874 -0.1429434758 -0.3356032606 0.3308280848 0.1829682062 0.2805339019 -0.3170214964 -0.0007586407 0.0009958876 -0.0004152371 -0.0021880774 -0.0018917659 0.0030330464 0.0001950338 0.0008526731 -0.0000579101 0.0006368035 -0.0020860307 -0.0031451904 -0.0009166293 0.0010499019 0.0000187166 0.0039626352 -0.0058439154 0.0018724549 -0.0067706274 0.0071516266 0.0003791561 -0.0001977705 -0.0004580980 0.0000010725 -0.0019123412 0.0058174290 -0.0057526648 0.0032814812 -0.0056490402 0.0025192770 0.0020518038 0.0007029766 0.0092843979 -0.0038920097 -0.0077010598 -0.0056816745 0.0003254102 -0.0001681126 -0.0005591957 -0.0002642529 0.0002688874 0.0005569958 -0.0109207719 -0.0003777339 -0.0124310123 -0.0127564606 -0.0078710484 -0.0060408958 0.0077716468 0.0255140296 0.0467052541 0.0040298229 -0.0075541710 -0.0501667416 -0.0542110387 -0.0990848244 -0.2704344566 0.0497439673 0.1162176457 0.2416307363 0.0064006009 0.0000340967 0.0389478163 0.0073908771 -0.0128202682 -0.0130032462 -0.0612580703 -0.0873177714 -0.1943648824 0.0263122246 0.0230155096 0.0872039605 -0.0046233358 0.0019134313 -0.0082958961 0.0004224075 -0.0018998327 -0.0013915911 -0.0031804615 0.0012656220 0.0035358174 0.0067811759 0.0051001646 0.0024445682 0.0237767772 -0.0094714217 -0.0091000359 -0.0049138718 0.0108134931 0.0106736152 -0.0057516735 -0.0039023981 0.0077248488 0.0039426174 -0.0024190575 -0.0042761907 0.0295054829 -0.0205868902 -0.0098197987 -0.0275515267 0.0120976829 0.0161056838 0.0006022582 -0.0010467663 -0.0002208694 -0.0037804054 -0.0010375125 0.0000353407 0.0035239674 0.0047050849 -0.0000997987 -0.0029423331 -0.0002178311 0.0010060552 -0.0011523379 0.0001734227 -0.0003160297 -0.0036748544 0.0022739562 0.0022286237 -0.0000058085 0.0007123970 0.0017854501 0.0017715252 -0.0009461972 0.0006588991 0.0147585322 -0.0232422508 -0.0039868851 -0.0425506899 -0.0367895993 -0.1238016787 0.0062556998 0.0175810994 0.0228304979 -0.0216980083 0.0024121833 0.0172053896 -0.0030829398 -0.0027500103 -0.0009112583 -0.0043996696 0.0007064595 -0.0011306926 -0.0093427415 0.0024984645 -0.0266160328 -0.0025870749 -0.0005332746 0.0003640485 0.0094666898 0.0122840326 -0.0000688950 -0.0184640024 -0.0116230630 -0.0242029400 0.0126162661 -0.0037495651 0.0132993354 0.0158931467 0.0071050290 -0.0003575654 0.0012574848 -0.0014847542 0.0020070996 -0.0004078899 0.0013243958 -0.0032870896 -0.0061562485 -0.0001269016 0.0052224311 -0.0073703253 0.0029325614 0.0149031517 -0.0171385564 0.0097019388 -0.0349581317 0.0054061288 -0.0044125460 0.0034996649 -0.0010228318 -0.0021297303 -0.0006704491 -0.0041465442 -0.0027928625 0.0009856669 0.0006454545 0.0082773521 -0.0056736360 -0.0042354894 -0.0030352671 0.0045436333 0.0003848638 0.0050126998 -0.0009469808 -0.0004242752 -0.0238507568 -0.0015338694 0.0274326338 -0.0056238602 0.0307277669 -0.0134347096 -0.0075536746 -0.0136108841 0.0007973360 -0.0030655198 -0.0008028974 0.0007206858 0.0026059548 -0.0037332293 0.0164815636 -0.0120272552 0.0264540308 0.0011250305 -0.0004170813 0.0015330361 -0.0001038791 0.0017324531 0.0013260104 -0.0023540884 -0.0022472552 -0.0004490206 0.0017066846 0.0005228746 -0.0013411463 -0.0006626963 -0.0008593931 -0.0001025344 0.0001088990 0.0004898124 -0.0001427288 -0.0014363919 -0.0024822195 0.0042352396 0.0035064745 0.0048712685 0.0025074289 0.0001756480 -0.0011172603 0.0016210682 0.0007213433 0.0023810087 0.0016744491 -0.0013415109 0.0035019259 -0.0053658444 0.0023869034 0.0021728859 0.0102900501 -0.0170149469 0.0255877528 -0.2686929592 0.0104706459 0.0033000781 0.0036191932 -0.0011189424 0.0022931229 0.0016139210 -0.0029451165 -0.0019901249 0.0002086064 -0.0049652289 -0.0023961676 -0.0001455258 0.0012726772 -0.0000892895 0.0000438510 -0.0002909176 0.0003751638 0.0000448753 -0.0002752933 0.0008535987 0.0005257623 0.0001509452 0.0004537562 -0.0002417047 0.0033864601 0.0033942869 0.0005314269 0.0015258208 -0.0029913954 -0.0024111572 -0.0005669173 0.0006597796 -0.0002209191 -0.0001160029 0.0002985318 -0.0003456628 0.0001437961 -0.0000981685 -0.0002023354 0.0017651891 0.0018105998 -0.0016759074 -0.0005303256 -0.0009230060 -0.0060936276 0.0019430984 -0.0024024910 0.0022610754 0.0000972635 0.0006044134 0.0009464564 0.0000449391 0.0005049476 0.0008545110 0.0001035450 -0.0018663314 -0.0012619322 -0.0033560256 0.0013112181 0.0017761241 -0.0004016152 -0.0113886620 -0.0062151964 -0.0032537293 0.0007511206 0.0020561764 0.0069140504 -0.0131580389 0.0077645379 0.0088695736 0.0146881022 -0.0251772322 -0.0187618916 -0.0270856324 0.0159175272 0.0005078517 0.0154723620 -0.0130445035 -0.0205783695 -0.0300650761 0.0370815436 0.0175270531 0.0408740344 -0.0218544822 -0.0516873829 -0.1175212212 0.0978195202 0.0249154146 0.1649483476 -0.1235690638 0.0003271655 -0.0101846895 0.0067366929 0.0723554520 0.2223628407 -0.1773574807 -0.1053450725 -0.1674069517 0.1858456477 -0.0014419480 0.0007480825 0.0000598767 -0.0092791270 -0.0030182795 0.0088602881 0.0014733456 0.0014604504 0.0002994250 0.0006245954 -0.0050833564 -0.0113135459 -0.0018120322 0.0017743440 -0.0003461085 0.0033635731 -0.0062623906 0.0029382733 -0.0139735047 0.0014706968 0.0055271641 -0.0009315952 -0.0006922456 -0.0002621497 -0.0036823978 0.0050208221 -0.0149513253 0.0054482158 -0.0102287446 0.0033520695 0.0000163941 0.0014478231 -0.0018814212 0.0018493215 0.0024259529 0.0000248481 0.0009966854 -0.0005284270 -0.0015062302 -0.0007545572 0.0006581187 0.0016535817 -0.0085654898 -0.0073933158 -0.0226999474 -0.0263216022 -0.0155306915 -0.0090368830 0.0132202004 0.0488912169 0.0777595462 -0.0068099749 -0.0175784056 -0.0806281139 -0.0882356751 -0.1643277011 -0.4631517532 0.0683593834 0.1936608832 0.4103728408 0.0111233688 0.0119298343 0.0612318848 0.0182726993 -0.0245880406 -0.0215117441 -0.1061428851 -0.1352544925 -0.3331107072 0.0516301658 0.0383674712 0.1438661682 -0.0135351420 0.0052868524 -0.0239363613 -0.0013919147 -0.0047295591 -0.0026243286 -0.0026259689 0.0033192264 0.0054101861 0.0160885696 0.0150978854 0.0084179867 0.0343911476 -0.0079765205 -0.0065170608 0.0024347302 0.0209302259 0.0210519222 -0.0082666339 -0.0138201301 0.0156228513 0.0044971671 -0.0041887511 -0.0059133066 0.0390594317 -0.0340373767 -0.0027233645 -0.0379927215 0.0110043832 0.0212308909 -0.0035651417 0.0031225519 -0.0014726851 0.0073096359 -0.0056125317 0.0044419688 -0.0134067021 -0.0183208829 0.0063319169 0.0176181851 0.0078820128 -0.0018297175 0.0034355097 0.0004694776 0.0003290383 0.0072136743 -0.0065593090 -0.0050206848 0.0058446021 -0.0052294654 -0.0047897100 -0.0068350832 0.0019259300 0.0002941314 -0.0011386434 0.0016201859 -0.0004245321 0.0043258252 -0.0001160064 0.0005823912 0.0002627309 -0.0001777301 -0.0001051328 0.0023825562 0.0001353084 -0.0012680028 0.0002138993 0.0000216752 0.0001814817 -0.0014740655 0.0016876035 0.0005939155 0.0014068268 -0.0001947471 0.0021489242 -0.0004408909 0.0031001064 0.0060487835 0.0034841726 -0.0058567421 -0.0034613732 0.0260945806 -0.0125180414 -0.0098658224 -0.0015322846 0.0002623894 -0.0020656523 -0.0022564286 -0.0013646713 -0.0003242521 0.0013034059 0.0002243802 0.0005238004 -0.0010551632 0.0001658147 0.0000364794 -0.0002811980 -0.0000132890 0.0003073861 0.0010191206 -0.0005528476 0.0039597096 -0.0543488123 0.0314570811 -0.0936170795 0.0103233826 -0.0063297701 0.0147429801 -0.0000196057 -0.0003232597 0.0008295511 -0.0039630293 0.0026304979 -0.0076846601 -0.0094676929 0.0052203872 -0.0140931122 0.0030809400 -0.0025541075 0.0063507042 -0.0008098816 0.0006831785 -0.0004261674 0.0287923808 -0.0122550296 0.0478593823 0.0522211120 -0.0288820858 0.0928170761 -0.0264920819 0.0129913432 -0.0387372266 0.0003835641 -0.0003505770 0.0002786383 -0.0005567576 0.0004176395 -0.0017880035 0.0082868340 -0.0076706399 0.0121072306 0.0005599078 -0.0006115599 0.0007469568 0.0000962162 0.0000554979 0.0003927077 -0.0002882293 0.0000053335 -0.0003700492 0.0001786092 0.0002090973 -0.0004192658 0.0001374182 0.0004071524 -0.0001272731 -0.0003869511 0.0000568958 0.0000877496 0.0005550611 -0.0003558706 0.0011655618 0.0010355446 0.0001562835 0.0013948359 0.0000982636 0.0005956576 0.0008973062 -0.0001074363 0.0000421331 0.0008249226 -0.0010358025 0.0004017672 -0.0021392964 0.0002978578 0.0004266616 0.0007103412 -0.0012672677 0.0027207002 -0.0261935728 -0.0078431089 0.0087672579 -0.0002295230 -0.0027514795 0.0014209853 0.0023560606 -0.0042273340 -0.0025088354 0.0002456192 -0.0063613770 -0.0030607364 -0.0001209869 0.0026033576 0.0005600845 0.0006313128 -0.0004063371 -0.0012994892 -0.0007245549 -0.0007661930 0.0001089724 -0.0002633502 -0.0007297242 0.0005005393 -0.0003644557 0.0040601263 0.0045254362 0.0008434677 0.0019383558 -0.0040643649 -0.0031586635 0.0019316792 0.0001763185 -0.0012553577 -0.0046637346 0.0078664740 0.0008456545 -0.0016650704 0.0055661044 0.0037152489 0.0017545514 0.0016799877 -0.0010429174 0.0001202768 -0.0016761895 0.0018305543 0.0020021228 -0.0000444059 -0.0008478005 0.0005482431 0.0022019073 0.0025019970 0.0009980852 -0.0026786208 -0.0013922017 0.0012819005 -0.0019076998 -0.0010500137 -0.0043117924 0.0012448507 0.0019100959 -0.0003894511 -0.0141115017 -0.0077770723 -0.0040497086 0.0005113744 0.0024976525 -0.0013700246 0.0006134332 -0.0000636800 0.0003711873 0.0005080414 -0.0007413416 0.0008953579 0.0002511604 0.0019247062 -0.0002483363 -0.0002650253 0.0003470845 0.0011631790 0.0005416260 -0.0032558914 -0.0006827369 -0.0018876086 0.0018060105 -0.0013017477 -0.0033203354 0.0029519902 0.0011265228 0.0043865011 -0.0001089415 0.0001403336 0.0001977915 -0.0001945923 -0.0051551486 -0.0129546235 0.0076186171 0.0050006163 0.0107435120 -0.0090695439 0.0474015194 -0.0910493471 0.0365674284 -0.0494007879 0.0989514656 -0.0340623896 0.0003433412 -0.0205197145 0.0014291206 0.0210228905 -0.0345508461 0.0159607042 -0.0183513318 0.0397029787 -0.0197246349 -0.2647874522 0.5149025899 -0.1563964806 0.2729897629 -0.5998039664 0.1575853038 0.0008616493 0.0121760981 -0.0033755449 -0.0897522779 0.1986610700 -0.0519762208 0.1042954461 -0.2254108771 0.0374497687 -0.0000701585 -0.0001764717 -0.0001978249 -0.0000029949 0.0000578329 0.0002357210 -0.0009631992 -0.0002721015 0.0052205885 0.0000825971 -0.0033977571 -0.0015772923 0.0004362634 -0.0003275082 0.0001409294 0.0023304516 0.0010457872 -0.0005400358 -0.0002937402 -0.0017163377 0.0004438413 0.0001447755 -0.0000787330 0.0002316118 -0.0007889304 -0.0011137209 0.0021329548 0.0001224898 -0.0011613784 -0.0008866389 -0.0003503585 0.0001534117 -0.0002014702 -0.0017305218 0.0011764969 -0.0001091043 -0.0010180476 0.0007374932 0.0009685965 -0.0019764547 0.0010074728 -0.0001446514 0.0018133758 -0.0006438793 0.0027383501 0.0043861023 0.0014346062 0.0003724784 -0.0036416673 -0.0018598110 0.0027380897 0.0010327291 -0.0024417806 -0.0018634451 0.0139847387 -0.0113303772 -0.0095462927 -0.0133204219 0.0042292561 0.0070755115 -0.0033132226 0.0029081212 0.0009555649 0.0004132936 0.0001421735 -0.0042151687 0.0154119893 -0.0076589732 -0.0127241594 -0.0111508914 0.0068672465 0.0031121753 -0.0021611365 0.0050171183 0.0021142825 0.0216039005 0.0085786112 -0.0020625574 -0.0145411039 -0.0184679956 -0.0011722619 0.0106099103 -0.0022629251 -0.0055850773 0.0035766366 0.0014203413 -0.0025757757 -0.0012381166 -0.0097782442 -0.0032535690 0.0053557798 0.0001158263 -0.0020308626 0.0068090336 -0.0058192426 0.0056970620 0.0063311199 -0.0106792683 0.0023200632 -0.0319551251 -0.0013857814 -0.0047077727 -0.0026513975 -0.0001850000 0.0016780249 -0.0168720566 -0.0012364045 0.0063527656 -0.0013311196 0.0030534622 -0.0011867861 -0.0006189322 0.0010405813 0.0024031649 -0.0028165227 0.0009331027 -0.0143761995 -0.0004421768 -0.0005486996 -0.0031114787 0.0043494125 0.0071310505 -0.0000917569 -0.0207068512 -0.0003286897 -0.0110015847 0.0139974918 -0.0071023510 0.0076896452 0.0158644825 0.0089303414 0.0011813764 -0.0092198711 0.0026143982 -0.0058496596 -0.0020642920 -0.0033558967 0.0040187492 0.0047179096 0.0006913541 -0.0062120086 -0.0296004886 0.0110121437 -0.1173721853 0.1266137135 -0.0785343443 0.2279177372 -0.0264051263 0.0157750241 -0.0340749401 0.0038795975 -0.0030157679 -0.0025117507 0.0062369603 -0.0017128218 0.0200680706 0.0194129955 -0.0115362192 0.0301870813 0.0014159702 0.0083852515 -0.0125060408 -0.0002577327 -0.0070624738 -0.0001933363 -0.0660088690 0.0568503184 -0.0903010897 -0.1152429469 0.0623254277 -0.1921881954 0.0445354920 0.0056977501 0.0606733457 0.0057242990 -0.0023641468 -0.0097493565 0.0096251665 -0.0036562854 0.0314586289 -0.2077110841 0.1949339311 -0.2851213383 -0.0069036315 0.0124957848 -0.0112389223 0.0046824698 -0.0113376294 -0.0130577129 0.0122871049 0.0128573317 0.0040163102 -0.0214735886 -0.0076642834 0.0134824619 -0.0005020692 -0.0057007165 0.0020990454 0.0038164545 -0.0032495460 0.0011484783 0.0065312884 0.0144040951 -0.0237525904 -0.0383388173 -0.0270977082 -0.0217130836 0.0042852462 -0.0124375984 -0.0183418941 -0.0047392739 -0.0047104288 -0.0217720034 0.0300581560 -0.0178558212 0.0388929733 -0.0006934875 -0.0024430383 -0.0105323418 0.0183915728 -0.0288194863 0.3195176446 0.0067171058 0.0008603667 0.0027666590 0.0118163576 -0.0254892801 -0.0179834650 0.0380240956 0.0281444739 -0.0014839580 0.0578301120 0.0265767586 0.0009331906 -0.0200499405 -0.0082659702 0.0012255002 0.0049250710 0.0027484205 -0.0011551191 0.0050048617 0.0020340801 -0.0010117648 0.0023154305 0.0009784139 -0.0016523545 -0.0390230286 -0.0440826588 -0.0085873602 -0.0190518574 0.0388943376 0.0304542433 -0.0065034592 -0.0090876644 0.0048201987 0.0108978984 -0.0214295535 0.0091575473 -0.0118301787 0.0045219263 -0.0061893838 -0.0089210266 -0.0076562961 -0.0095869874 0.0000851338 0.0124425255 -0.0111871051 -0.0131718516 0.0015479997 0.0036590103 -0.0041056829 -0.0029261166 0.0033818984 -0.0043791355 0.0107148714 0.0143748511 -0.0040077104 -0.0039936903 -0.0042308361 0.0429875069 -0.0153999473 -0.0218733741 0.0041554308 0.1386738222 0.0759714906 0.0408603821 -0.0075489525 -0.0259576788 0.0127766164 -0.0045824556 0.0008766087 -0.0151505615 -0.0252218773 0.0385771372 0.0015839947 0.0195694900 -0.0492092109 0.0046893814 -0.0017500001 -0.0014430404 -0.0156019547 -0.0150127014 0.0524734901 0.0103130852 0.0303075643 -0.0413992467 0.0906757010 0.1800703870 -0.1501772406 -0.0461038089 -0.2188953215 0.1132231972 -0.0021384973 0.0001875384 0.0005267964 0.1073799013 0.2134040285 -0.1264753771 -0.0873088032 -0.2180642362 0.1567544113 0.0046348576 -0.0095050752 0.0016090292 -0.0113608284 0.0074148837 0.0039942937 0.0005496589 0.0028093256 -0.0002721184 0.0089524478 -0.0184307540 -0.0035802201 -0.0102956357 0.0150643487 -0.0034623092 -0.0215143473 0.0507456963 -0.0175364843 0.0171569949 -0.0528425013 0.0222048339 0.0010189929 -0.0019053715 0.0010977678 -0.0341067521 0.0950096469 -0.0379042275 0.0413189975 -0.0868637751 0.0233972415 0.0002068604 0.0021400232 0.0033208537 -0.0003833346 -0.0011153890 -0.0025256079 -0.0005294658 0.0005238134 0.0003858111 -0.0001262365 0.0003616147 -0.0008957779 -0.0042007204 0.0017713361 -0.0011898783 -0.0173262657 -0.0068337175 0.0043852939 0.0023898778 0.0132857991 -0.0017956297 0.0003594107 0.0015632985 -0.0040478132 0.0011786558 0.0053672250 -0.0235201676 0.0016032166 0.0147404520 0.0136802386 0.0022958110 -0.0022865863 0.0024358586 0.0128509072 -0.0095906296 0.0012033153 0.0025452475 -0.0074223916 -0.0083184550 0.0140608526 -0.0094441359 0.0018070211 -0.0076391889 0.0037513782 -0.0119078416 -0.0023419277 -0.0015361975 -0.0008130819 0.0019644211 -0.0004183771 0.0001026351 0.0068973603 0.0085678463 0.0046919688 -0.0041229133 0.0045168244 0.0065414221 0.0078350189 0.0090037356 0.0041104106 0.0008360286 -0.0106209741 0.0048771352 -0.0018919537 0.0002744858 0.0009057984 -0.0096955804 -0.0030018150 0.0166964024 0.0085735808 -0.0065652098 -0.0054567066 0.0387272798 -0.0328216487 0.0238425619 -0.0532948848 0.0864144728 -0.0607370452 0.1382261097 0.1908361532 -0.0819041054 -0.2090328512 -0.1103116947 0.0122748576 -0.0395948145 -0.0111558807 -0.0053411935 -0.0807411202 0.0820347177 0.0589222284 -0.0775396614 0.0746800032 0.0662070358 0.1076101040 -0.0246635146 -0.0153401620 0.0055990675 -0.0051466722 0.0029258697 -0.0088427479 0.0037702370 0.0001935095 0.0009494867 0.0024935987 -0.0009702801 -0.0067116011 -0.0029980289 0.0071305530 0.0014599472 -0.0037907097 -0.0012048338 -0.0018376851 0.0002425705 -0.0012224351 -0.0066691806 0.0003431911 -0.0118415720 -0.0006287441 -0.0016202697 -0.0006450492 0.0058124719 0.0088267435 0.0004217767 -0.0181425657 -0.0044320853 -0.0123501920 0.0062705969 -0.0017476846 0.0077550728 0.0033768312 0.0018284655 0.0012020363 0.0020616174 -0.0013750497 0.0035461409 -0.0003926617 0.0010389035 -0.0008982410 -0.0050826463 0.0014397500 -0.0038349247 -0.0350741348 0.0137640253 -0.0752014014 0.0919703246 -0.0589164132 0.1576944137 -0.0156536721 0.0072602427 -0.0268885842 0.0018072674 -0.0054267830 -0.0032303629 0.0003267284 -0.0064527920 0.0192866144 0.0190013092 0.0014209075 0.0198595093 -0.0067163061 0.0026811525 -0.0048072148 0.0014688473 0.0033904760 -0.0010789582 -0.0614406111 0.0129524050 -0.0892764793 -0.0671463755 0.0498042497 -0.1345154932 0.0225824774 -0.0113483665 0.0395623899 0.0054008262 -0.0058119812 -0.0088909607 0.0091081314 -0.0000658137 0.0207772420 -0.1468688823 0.1423252983 -0.1991897573 -0.0044285033 0.0099340721 -0.0065686209 0.0016260300 -0.0033579387 -0.0089496178 0.0013178272 0.0037364268 -0.0018458875 -0.0085763028 -0.0052380271 0.0107495949 -0.0045936172 -0.0062124444 -0.0026831256 0.0077923618 -0.0024447030 0.0067384248 0.0100261991 0.0007001350 0.0164398764 -0.0289629506 -0.0091659995 -0.0329255684 0.0110799917 -0.0137140877 0.0162226373 -0.0161894927 0.0090273433 -0.0518587637 0.0239592043 -0.0075251962 0.0330536036 0.0022391075 0.0017008240 0.0066147921 -0.0094212579 0.0082061952 -0.1402147665 0.0077177073 0.0018677671 0.0028862512 0.0070235440 -0.0176421915 -0.0119280627 0.0264437402 0.0192690362 -0.0011679781 0.0388505986 0.0176449974 0.0004412806 -0.0144315972 -0.0060342072 0.0016880239 0.0041111160 0.0017790202 -0.0013766774 0.0037316147 0.0020370377 -0.0004849051 0.0022560478 0.0011403322 -0.0019845498 -0.0263967441 -0.0302880219 -0.0061043408 -0.0130726321 0.0268345376 0.0210180609 -0.0042377877 -0.0083119182 0.0037191309 0.0075702855 -0.0151493736 0.0079578428 -0.0118145562 0.0076463864 -0.0032804194 -0.0060119676 -0.0046712786 -0.0094590488 0.0005337226 0.0058187507 -0.0160506554 -0.0088486815 0.0000196624 0.0036340097 -0.0045409320 -0.0032724223 0.0033820701 -0.0027114829 0.0079499625 0.0123960926 -0.0039542472 -0.0058079950 -0.0056515767 0.0292276787 -0.0103752039 -0.0148872782 0.0026764261 0.0949276205 0.0518582891 0.0279278149 -0.0045097767 -0.0175791401 -0.0023812165 -0.0004626732 -0.0021384819 0.0249860553 0.0441126189 -0.0665322815 -0.0176932014 -0.0438855878 0.0700462466 -0.0053881865 0.0058656704 -0.0013742986 0.0151202532 0.0282752772 -0.0596450906 -0.0124112778 -0.0370582576 0.0603976564 -0.1719579077 -0.3154380219 0.2588466607 0.0795028966 0.3753176118 -0.2320340923 0.0022320268 -0.0026821735 0.0008219262 -0.1549983310 -0.2606423298 0.1624564820 0.1133205587 0.3017096790 -0.2008743538 0.0015142183 -0.0038900660 -0.0004349626 -0.0093687896 0.0015683819 0.0066348478 0.0011177338 0.0027068954 0.0000021904 0.0051701185 -0.0120565009 -0.0070845431 -0.0066043290 0.0083852026 -0.0012321818 -0.0057365126 0.0182038208 -0.0073109858 0.0007555626 -0.0190904330 0.0138883231 0.0003364378 -0.0017602360 0.0007936629 -0.0182229105 0.0546210459 -0.0276620519 0.0232373648 -0.0490013118 0.0144459958 0.0005440667 -0.0017308406 -0.0036594575 0.0010016233 0.0012891337 0.0020521515 -0.0000544394 0.0002081390 -0.0002913541 -0.0003160558 0.0005204674 -0.0001331605 -0.0002708956 0.0009361188 -0.0004499429 -0.0076582320 -0.0044584104 0.0011541034 0.0011466285 0.0064278699 0.0000566215 -0.0019797701 -0.0013834144 -0.0024486046 0.0018388165 0.0001390200 -0.0161745416 0.0009740923 0.0068210367 0.0160320502 0.0009368132 0.0007277367 0.0006583416 0.0056662700 -0.0029312833 0.0011588201 0.0026517278 -0.0018528588 -0.0049113541 0.0057693105 -0.0039761468 -0.0057398078 -0.0070089789 0.0023675310 -0.0125785989 -0.0023153056 -0.0021349532 -0.0011224765 0.0014754623 0.0024341997 0.0002125468 0.0068484417 0.0080598382 0.0045385158 0.0039007002 0.0042866045 0.0031912554 0.0071991275 0.0077039314 0.0062112203 -0.0004984931 -0.0080827736 0.0048035476 -0.0003431349 -0.0013984327 0.0009234232 -0.0019788089 -0.0063035610 0.0087711742 -0.0007641850 -0.0063092994 0.0007406288 0.0262095084 -0.0200936740 0.0182646197 -0.0240869196 0.0670333911 -0.0445979317 0.0884769163 0.1226129957 -0.0591360345 -0.1420414765 -0.0802231804 0.0049662157 -0.0268911951 -0.0095450715 -0.0043685069 -0.0541790397 0.0598361767 0.0411486616 -0.0559729747 0.0552729179 0.0483671136 0.0835321994 -0.0181112274 -0.0142158073 -0.0015182909 0.0021889034 -0.0007221908 0.0060957764 -0.0004211020 -0.0000384641 0.0004037512 -0.0001377766 -0.0000452665 0.0036212570 0.0006938823 -0.0011235212 0.0003854148 -0.0003662761 0.0001078222 -0.0002179673 -0.0014667178 0.0005767060 0.0001235165 -0.0006244911 0.0024917274 -0.0002792610 0.0009082066 0.0008518455 -0.0002001845 -0.0023319446 -0.0007906256 0.0074765017 -0.0009409706 0.0009446637 -0.0019876238 0.0011394348 -0.0011702978 -0.0028141917 -0.0011025483 0.0004190487 0.0002627203 -0.0006751505 0.0003593253 0.0009354391 0.0007962995 -0.0003003928 -0.0003816826 0.0008292799 -0.0015318670 -0.0280125760 0.0104632950 -0.0813349462 -0.2563805339 0.1697837920 -0.4695879280 0.0506777453 -0.0303615022 0.0709657387 0.0061997516 -0.0066736668 0.0032147392 -0.0241854390 0.0154003032 -0.0335550413 -0.0437393679 0.0245541314 -0.0649244215 0.0138923278 -0.0074781945 0.0285907857 -0.0031169202 0.0005950859 -0.0045637698 0.1367720459 -0.0470890158 0.2451850060 0.2413057563 -0.1337532793 0.4359525151 -0.1224601564 0.0877169263 -0.1694289359 0.0066630580 -0.0049524862 -0.0075453496 0.0076263922 -0.0010757828 0.0204443894 -0.1540277341 0.1462501206 -0.2016753413 -0.0038004428 0.0089072290 -0.0072072159 0.0058827565 -0.0127936832 -0.0125084091 0.0108214978 0.0149526742 -0.0006608192 -0.0220381297 -0.0067220285 0.0138307847 -0.0003524326 -0.0032028823 -0.0001370717 0.0026070086 -0.0031622064 0.0049265296 0.0162420348 0.0123716800 -0.0039652724 -0.0380688164 -0.0224319972 -0.0196972020 0.0090100274 -0.0105761840 -0.0055440531 -0.0125697022 -0.0012426304 -0.0338430145 0.0285043264 -0.0179949124 0.0317528437 0.0012762448 0.0000068125 -0.0015110604 0.0022611346 0.0002460281 0.0274919352 -0.0025983995 0.0021102753 -0.0011422781 0.0031960192 -0.0153361522 -0.0125847833 0.0233006666 0.0179065267 -0.0007350108 0.0333684688 0.0144591004 0.0003888705 -0.0130066568 -0.0051923521 0.0014956293 0.0038721523 0.0016468076 -0.0012611323 0.0041817158 0.0016426523 -0.0007586531 0.0022823711 0.0009237121 -0.0016109946 -0.0233238719 -0.0276840476 -0.0060235770 -0.0117648869 0.0246020647 0.0192143560 -0.0040107271 -0.0077516070 0.0034927472 0.0074381068 -0.0147720462 0.0072910546 -0.0108227051 0.0068790367 -0.0031706866 -0.0071532556 -0.0057975934 -0.0045373075 0.0005318088 0.0073934318 -0.0135100830 -0.0092961594 0.0007602216 0.0028985145 -0.0038445284 -0.0033378995 0.0021678830 -0.0027962592 0.0081883779 0.0114881745 -0.0036651547 -0.0050204013 -0.0048815103 0.0263350645 -0.0094799272 -0.0138247261 0.0022584179 0.0853459214 0.0464925324 0.0252725339 -0.0038093028 -0.0157052731 -0.0022004371 0.0006339650 0.0002654981 0.0000995193 -0.0004097741 -0.0008486095 0.0016612187 0.0007907112 0.0023143278 -0.0007147560 0.0002146218 0.0000929387 0.0005213272 -0.0018885165 -0.0021594412 0.0004829008 0.0002697939 0.0007840975 -0.0027678690 -0.0015695589 -0.0005583900 0.0025651697 0.0027637389 0.0006481482 0.0001742732 0.0000183030 -0.0001520201 -0.0006488985 -0.0026108328 -0.0020921526 -0.0000126173 0.0014878863 0.0006387874 -0.0038348610 0.0066389923 -0.0028227222 0.0057326246 -0.0058558374 0.0001016523 0.0009115298 -0.0053081109 0.0005870892 -0.0120829877 0.0234024073 -0.0052020291 0.0123810868 -0.0194458416 0.0069260769 0.0146794625 -0.0397683941 0.0121485602 -0.0095331297 0.0410135952 -0.0053525201 -0.0022485006 0.0040236140 -0.0030398840 0.0528893097 -0.1409123827 0.0436582236 -0.0519249165 0.1168150516 -0.0240817108 -0.0000216100 -0.0000435219 -0.0000913631 0.0000941221 0.0000799146 0.0001642831 0.0013897099 -0.0007740890 -0.0007834898 -0.0008553391 -0.0007720059 0.0025641559 0.0008603392 -0.0004071051 0.0001413513 0.0038103066 0.0014548372 -0.0011423206 -0.0004454767 -0.0026810094 0.0008119883 -0.0000701627 -0.0004784553 0.0004576524 -0.0007458524 -0.0020643834 0.0027290697 0.0001173241 -0.0022861462 -0.0006914173 -0.0004554915 0.0006081447 -0.0002061890 -0.0027808598 0.0019975852 -0.0003599983 -0.0012747799 0.0009829689 0.0001007968 -0.0029414806 0.0021899440 0.0002834810 0.0010392762 -0.0007261106 0.0016632473 0.0005545090 0.0003423619 -0.0001266141 -0.0004161703 -0.0000217504 0.0001557559 -0.0008557428 -0.0009460587 -0.0007124634 0.0009720140 -0.0013443109 -0.0018185957 -0.0011978156 -0.0006635872 -0.0008640450 -0.0003702125 0.0015073601 -0.0004303715 0.0004119620 -0.0003207541 -0.0002449513 0.0023710192 -0.0004015958 -0.0031925327 -0.0025089906 0.0011293088 0.0015431318 0.0256801952 -0.0157565564 0.0275886439 0.0134071777 0.0999802889 -0.0596767738 0.0745876722 0.1074343759 -0.0741761098 -0.1535991607 -0.1032775167 -0.0035891378 -0.0228023066 -0.0125658524 -0.0075142389 -0.0537373496 0.0632388608 0.0430338624 -0.0516297029 0.0558536682 0.0501842133 0.0963416658 -0.0205931149 -0.0199040412 0.0013125309 -0.0019744861 0.0008502887 -0.0066243821 0.0001987011 0.0005097177 -0.0007310885 -0.0002230401 0.0001289182 -0.0031954158 -0.0002448122 0.0013094423 -0.0000237737 0.0005554446 -0.0004445962 0.0000168962 -0.0000177698 0.0008810276 -0.0006010092 0.0002530927 -0.0028341810 -0.0001901917 0.0000105923 -0.0005731476 0.0008811180 0.0012603565 -0.0001036120 -0.0034377931 -0.0002906799 -0.0024082173 0.0025850577 -0.0012652248 0.0013202505 0.0030582520 0.0018579596 0.0004220804 -0.0014887475 0.0002172477 -0.0006515745 -0.0007658312 -0.0007250675 0.0011490504 0.0006721650 0.0005737815 -0.0023017616 -0.0108301773 0.0063183824 -0.0089675094 -0.0053588697 0.0031445012 -0.0075575390 0.0004883285 0.0001411287 0.0017325651 -0.0001688721 0.0011529481 0.0002498928 0.0007830799 0.0006858478 -0.0018836425 -0.0017159819 -0.0013627735 -0.0006747111 0.0009358512 -0.0001232653 -0.0003981374 -0.0003208886 -0.0009708473 0.0003172375 0.0052669884 0.0019515035 0.0071977831 0.0012776576 -0.0031720777 0.0058665518 0.0005544284 -0.0006887809 -0.0012450277 -0.0004435596 0.0008897188 0.0025529214 -0.0015083705 -0.0007765832 -0.0041363540 0.0280473976 -0.0262104319 0.0221133418 -0.0005349668 0.0003721605 0.0070369545 -0.0240763152 0.0332968785 -0.0175838991 -0.0635520171 -0.0271813613 -0.0767355097 0.0693141929 -0.0011083983 0.0418939619 -0.0400257376 -0.0035426109 -0.0622340542 0.0590393693 -0.0100232861 0.0998156284 0.1422432611 -0.0971503910 0.4627418354 -0.0904902620 0.1060523628 -0.3051712849 0.1338650525 -0.0436252986 0.3890087831 -0.2229040010 0.1231253468 -0.5734352415 0.0555872903 0.0105000309 0.1645526511 -0.0001021001 -0.0005000714 -0.0020682647 0.0034800617 -0.0047233978 0.0544767644 0.0011324527 0.0003884960 0.0003959435 0.0027442655 0.0002167374 0.0007310115 0.0002507307 -0.0035954377 -0.0014301206 -0.0026823548 -0.0003472219 -0.0000712957 0.0016377118 0.0002483083 0.0007500879 -0.0006767878 0.0000566424 -0.0004591805 -0.0001417741 0.0000981171 -0.0006216175 -0.0005717122 -0.0000093535 -0.0002951857 0.0011787845 0.0015675831 0.0002926525 0.0003278323 -0.0007318452 -0.0002964087 0.0010456418 -0.0001119122 0.0002351559 -0.0018648655 0.0028226644 -0.0001842723 0.0007459910 -0.0001902383 -0.0000911285 0.0002251406 -0.0000688764 -0.0007792405 0.0015945944 -0.0028844261 0.0064131251 -0.0017370709 0.0034163968 -0.0027161118 0.0004213474 0.0010442591 0.0009378627 0.0006486977 -0.0021760642 -0.0017251757 0.0007462428 -0.0006605658 -0.0003488225 -0.0035935939 0.0008099125 0.0009132655 -0.0009423567 -0.0039063421 -0.0032397386 -0.0007095531 0.0037957847 0.0008220046 0.0025837786 -0.0006907608 -0.0004321577 -0.0016898918 -0.0008592300 0.0051587544 -0.0009142094 0.0011497465 -0.0072385341 0.0012469387 -0.0012671330 0.0004981363 -0.0007980011 0.0024549794 0.0054809536 -0.0007622514 0.0000556054 -0.0036459206 0.0086616213 0.0181553256 -0.0120136191 -0.0028709611 -0.0314541536 0.0100205568 0.0000382062 0.0005221125 -0.0011227483 0.0075247009 0.0109050995 0.0004911923 -0.0016238570 -0.0128965856 0.0025473326 -0.0000257532 -0.0000525144 -0.0001696633 -0.0010927416 -0.0001335233 0.0009698988 0.0001709617 -0.0000084934 0.0000658020 -0.0000650638 -0.0002209977 -0.0014082145 -0.0001228365 -0.0000742674 0.0002635472 -0.0000337770 -0.0000783271 -0.0000981449 -0.0003194558 -0.0010968100 0.0017225580 -0.0001187261 0.0000432149 -0.0000838434 0.0010093516 -0.0013323942 -0.0012231948 -0.0001396339 0.0007797796 0.0004342500 -0.0003988496 0.0004631530 0.0006657508 -0.0000780561 -0.0001411674 -0.0000954790 0.0001272712 -0.0000921056 -0.0001662068 -0.0000718768 0.0000554085 0.0002081941 -0.0008825455 0.0004253649 -0.0000881882 -0.0033719012 -0.0013338933 0.0008966923 0.0004180318 0.0024353294 -0.0006732991 0.0002209069 0.0004184333 -0.0005566244 0.0004784471 0.0017388547 -0.0027990243 0.0001729060 0.0023685471 0.0012241270 0.0003520540 -0.0005712085 0.0002206963 0.0024699410 -0.0018129246 0.0004109448 0.0010213294 -0.0008701156 0.0000249574 0.0023877471 -0.0023618686 -0.0005193129 -0.0015193422 0.0007542078 -0.0024912307 -0.0004567388 -0.0003020926 -0.0002676313 0.0002218620 -0.0000888770 0.0001423466 0.0015158478 0.0017160514 0.0008490786 0.0001197294 0.0004380198 0.0008908640 0.0008817746 0.0023569850 0.0009975956 0.0000680599 -0.0021460137 0.0011116685 -0.0003213754 0.0000138295 0.0001766909 -0.0013842771 -0.0009578132 0.0030813205 0.0014932521 -0.0011215963 -0.0008952021 -0.0009808119 -0.0002846380 -0.0051268690 -0.0189397878 -0.0174033210 0.0091325188 0.0016027122 0.0001625375 0.0098805689 0.0028036955 0.0162930818 0.0063135517 -0.0009234516 0.0052849421 -0.0002951237 -0.0115645957 -0.0041090611 0.0037437548 0.0148677873 -0.0117027092 -0.0045349507 -0.0166440683 -0.0002550220 0.0105049555 -0.0017020102 0.0026321736 -0.0010603469 0.0084663977 -0.0002264320 -0.0010936541 0.0008822556 0.0004683921 -0.0001774315 0.0044208492 0.0005102452 -0.0020489015 -0.0007961421 -0.0013240625 0.0008579043 0.0000114020 0.0002552103 -0.0015060420 0.0010619326 -0.0003157921 0.0043176800 0.0003039801 -0.0001494392 0.0009516590 -0.0015141045 -0.0018643496 0.0002539408 0.0054319636 0.0004285359 0.0040131877 -0.0049819339 0.0025793022 -0.0023235937 -0.0042149851 -0.0023017697 -0.0007226594 0.0036280775 -0.0013274278 0.0020241164 0.0010046424 0.0018083162 -0.0019413001 -0.0011583087 -0.0005909505 0.0041046906 0.0034287628 0.0012006533 0.0573389612 0.0280448615 -0.0172685795 0.0416167686 -0.0016323945 0.0008563766 -0.0089651233 -0.0005428558 -0.0002623152 -0.0032528074 0.0010267682 -0.0047131071 0.0043630307 0.0055810317 0.0007601277 0.0064259008 -0.0050969334 -0.0009310002 -0.0019566393 0.0011197153 0.0051708794 0.0012357569 -0.0191058188 -0.0054460621 -0.0344747430 -0.0222324502 0.0164457221 -0.0437066474 0.0137120251 -0.0150127810 0.0250526270 -0.0040495723 -0.0022639277 0.0063395533 -0.0002612398 0.0108579788 -0.0182763701 0.0673518624 -0.0574817719 0.1863869537 0.0147748041 -0.0266435917 -0.0094419851 0.0982406629 -0.2185669706 -0.1066721557 0.1664026643 0.2665523251 -0.0750855655 -0.2829925327 -0.0395989302 0.1464016605 0.0467974983 0.0630978117 -0.0269890633 -0.0546131159 -0.0249083645 0.0805364302 0.3618478901 0.1855992318 0.1063756943 -0.3638480652 -0.1580236957 -0.0132392288 0.1473789123 0.0000366701 0.0097441929 -0.1883720105 -0.0822665387 -0.2724490782 0.1808527656 -0.2523023057 0.0772835873 -0.0012470475 -0.0005162642 0.0052831778 -0.0073024930 0.0153533190 -0.1470160370 -0.0016422004 -0.0010385164 -0.0005314027 0.0044008421 0.0029961906 0.0080869496 -0.0033570633 -0.0132743621 -0.0062984994 -0.0083445073 -0.0022470594 0.0005810032 0.0042358941 0.0023492750 0.0004390150 -0.0014832989 -0.0009062945 -0.0007296604 0.0010492749 -0.0018727804 0.0015326504 -0.0012479670 -0.0006897177 0.0000119908 0.0053901334 0.0064675375 0.0035408332 0.0032498101 -0.0052395804 -0.0048946524 0.0044984381 -0.0000377968 -0.0000500109 -0.0044786486 0.0072183882 -0.0011271897 0.0023446304 0.0012233172 0.0024186350 0.0019312528 -0.0001225751 0.0034551755 0.0040621591 -0.0106133736 0.0042671147 -0.0030492045 0.0155908793 -0.0112714077 0.0016442207 0.0016672880 -0.0004533589 0.0011590130 -0.0044130636 -0.0058289801 0.0014849236 0.0005542554 0.0008956785 -0.0100710784 0.0092751027 0.0098113420 -0.0012776741 -0.0239524809 -0.0133651718 -0.0091875323 0.0119060596 0.0068688187 -0.0027303851 0.0015603122 0.0001875773 -0.0004446433 -0.0036361265 -0.0003623738 0.0026771615 0.0030171542 0.0011775468 -0.0016753405 0.0000233861 0.0005861143 0.0007134311 -0.0030403682 -0.0032150202 0.0011615602 0.0010066986 0.0012544736 0.0102035966 0.0077865249 -0.0092282572 -0.0070720380 0.0004063139 0.0133245042 -0.0005098115 0.0000669915 -0.0010932482 0.0007312084 -0.0029984669 -0.0035645069 -0.0016264192 0.0012343309 0.0037545568 -0.0000398480 0.0003976090 0.0005228562 0.0017606680 0.0000948171 -0.0014587361 -0.0007994342 0.0003761885 -0.0002382435 0.0011787896 -0.0016201084 0.0028001035 -0.0006137629 0.0015874756 -0.0012244331 0.0006487940 -0.0010884681 0.0008858191 0.0007110515 0.0011751108 -0.0025991657 0.0003113489 -0.0002819304 0.0004171722 -0.0056746037 0.0153438108 -0.0021242249 0.0041941678 -0.0099385857 0.0007702302 0.0001900698 0.0012541908 0.0015347128 0.0004020921 -0.0004540600 -0.0006646606 -0.0000770510 -0.0001262284 -0.0000491425 0.0001871592 0.0000788336 -0.0001871244 0.0012376479 -0.0004408046 -0.0000272182 0.0049632180 0.0020186671 -0.0013418139 -0.0006006977 -0.0037284965 0.0012551926 -0.0002769121 -0.0006469685 0.0006964566 -0.0006610963 -0.0031607115 0.0032575584 -0.0001671775 -0.0031355854 -0.0012910835 -0.0003655922 0.0005640918 0.0000018258 -0.0036628649 0.0027664960 -0.0007998927 -0.0014697198 0.0003868575 -0.0013024512 -0.0029804297 0.0044742598 0.0012254527 0.0024661795 -0.0011788826 0.0041605209 0.0007404633 0.0004151960 0.0005278697 -0.0001518209 0.0000639244 -0.0002360653 -0.0026716125 -0.0028838448 -0.0012215632 -0.0008526108 -0.0002247654 -0.0005897470 -0.0004685141 -0.0047481820 -0.0018371486 -0.0000697267 0.0035738356 -0.0017865134 0.0004980215 0.0000815843 -0.0004677672 0.0027771747 0.0017370661 -0.0046725166 -0.0024919553 0.0021907370 0.0013273984 -0.0153332356 0.0059775355 -0.0257335030 -0.0425534359 -0.0922485829 0.0510724390 -0.0315951412 -0.0495851839 0.0613994985 0.1111097555 0.0922573631 0.0140517255 0.0040721220 0.0124799026 0.0042984042 0.0076872593 -0.0270321529 -0.0131827096 0.0331363749 -0.0319928169 -0.0216939545 -0.0595796016 0.0099977635 0.0207041470 -0.0146099723 0.0212294061 -0.0078415705 0.0660186446 -0.0017748897 -0.0030468469 0.0058964219 0.0016374847 -0.0015313018 0.0338960188 0.0075757416 -0.0204474052 -0.0101767420 -0.0064142836 0.0066626370 0.0001333114 0.0031108943 -0.0122259561 0.0138720488 -0.0026733120 0.0393032323 0.0029156741 -0.0000071213 0.0081192449 -0.0146706146 -0.0211731577 0.0012936235 0.0535313112 0.0068969644 0.0404285426 -0.0389566358 0.0182049546 -0.0212843126 -0.0301412862 -0.0191670274 -0.0069076278 0.0192941687 -0.0053807008 0.0075770802 0.0139699920 0.0140794850 -0.0208192709 -0.0067860450 -0.0108633939 0.0429695222 -0.0513072117 0.0235790943 -0.0130346058 0.0450841300 -0.0263406013 0.0652487275 -0.0036145867 -0.0003827718 -0.0144643138 -0.0011919287 -0.0082186349 -0.0052995212 -0.0080171052 -0.0144881985 0.0196096337 0.0195649493 0.0196337851 0.0054760599 -0.0146806578 -0.0047737782 0.0032011013 0.0019695682 0.0138805877 -0.0028143952 -0.0620053786 -0.0568537497 -0.1016046943 0.0014275684 0.0330331832 -0.0599363979 -0.0019859843 -0.0389873615 0.0097603858 0.0060536247 -0.0098930666 -0.0075859099 0.0087176893 0.0056869834 0.0044438878 -0.0510583095 0.0599424189 -0.0660457579 -0.0002526889 0.0060248840 -0.0009267765 -0.0030753739 0.0086222303 -0.0029499515 -0.0103604250 -0.0114710146 -0.0002174936 0.0079649712 -0.0002845295 0.0007296965 -0.0054139780 -0.0083694529 0.0003427424 0.0070471074 0.0003878220 0.0037205547 -0.0070948951 -0.0122222863 0.0183352169 -0.0041642192 0.0166451980 -0.0253705780 -0.0013392254 -0.0104175367 0.0052911557 -0.0075239552 0.0188025362 -0.0299510482 0.0170125867 0.0094343216 0.0234787234 -0.0004223611 0.0037726934 0.0339032189 -0.0480554468 0.0832130211 -0.8612910960 -0.0196321748 -0.0082549999 -0.0063228786 -0.0053430166 -0.0097847691 -0.0024461740 0.0122590966 0.0033754133 -0.0035886380 0.0106128182 0.0042404809 0.0004145228 -0.0075074906 -0.0017724535 0.0028246922 0.0039115295 -0.0007822513 -0.0022904078 0.0038147534 0.0016261101 -0.0008293392 0.0026368939 0.0008277845 -0.0023475617 -0.0097674620 -0.0136390461 -0.0039465213 -0.0049757047 0.0141927805 0.0102907518 0.0022251806 -0.0098697034 0.0020071173 0.0028734108 -0.0070108976 0.0082453764 -0.0161803116 0.0209966894 0.0056092869 -0.0073374712 -0.0034499909 0.0156942790 -0.0006631105 0.0015634020 -0.0336178361 0.0005130004 -0.0036636517 0.0026544733 -0.0043747239 -0.0047967038 0.0006983780 -0.0012485807 0.0059910685 0.0089777372 -0.0041935741 -0.0086751796 -0.0076978081 0.0090623993 0.0014854534 -0.0021242011 -0.0000843732 0.0363030005 0.0200228941 0.0086856291 0.0039838266 -0.0026111111 -0.0179946234 0.0082552656 0.0020674567 -0.0085456970 -0.0204756630 0.0213495289 0.0184810761 0.0254711843 -0.0112959584 -0.0018650900 -0.0029460100 0.0033763111 0.0038878902 -0.0173454238 -0.0049146284 0.0017946124 0.0044443594 -0.0118876209 0.0992859959 0.1232396011 -0.0978425485 -0.0445249242 -0.1171495713 0.1259034950 0.0002159421 0.0032941091 -0.0012157620 0.0365000698 0.0157635642 -0.0272288068 -0.0170620143 -0.0523217557 0.0278822031 -0.0011979225 0.0022451015 0.0052779029 0.0201952656 0.0020527746 -0.0180421415 -0.0049866595 -0.0013304703 -0.0017076904 0.0007148052 0.0043636405 0.0251751357 0.0039920190 0.0013284542 -0.0070936862 -0.0047118758 -0.0083594967 0.0080617851 0.0133178699 0.0154501897 -0.0245385666 0.0018555109 0.0000093087 0.0011991040 -0.0182137526 0.0192847249 0.0233114056 0.0032849000 -0.0117145072 -0.0108968543 -0.0002887313 -0.0003896216 0.0007353315 -0.0008408777 -0.0006961253 -0.0004075029 -0.0012708293 0.0007777803 0.0017544694 0.0010749267 -0.0005330474 -0.0022246754 0.0088773660 -0.0032479416 0.0001598815 0.0393700410 0.0178233895 -0.0103475412 -0.0052190466 -0.0314542754 0.0081927526 -0.0001364262 -0.0022648882 0.0075002409 -0.0061481068 -0.0209233002 0.0388345589 -0.0041261923 -0.0259644776 -0.0282636767 -0.0023891678 0.0022839086 0.0017244810 -0.0292376551 0.0202449623 -0.0085960669 -0.0155093942 -0.0012631342 -0.0145272757 -0.0202351502 0.0405806386 0.0241162226 0.0231372884 -0.0100176905 0.0410215508 0.0079239563 0.0046783302 0.0057577408 -0.0006099016 -0.0025925012 -0.0024281136 -0.0264508879 -0.0270765363 -0.0111139631 -0.0188118190 -0.0014595492 -0.0018001999 -0.0003820671 -0.0469948829 -0.0208465250 -0.0002938051 0.0323933850 -0.0167382797 0.0041854336 0.0018967083 -0.0060668135 0.0225696968 0.0176695051 -0.0404106678 -0.0227827790 0.0252907429 0.0109693805 0.0103549009 0.0082093023 0.0253345808 0.0861720592 0.0954371877 -0.0462202532 -0.0028381822 0.0023845513 -0.0545512821 -0.0650921058 -0.0806930058 -0.0257763727 -0.0114436770 -0.0129570976 -0.0163380487 -0.0609076024 0.0669530480 0.0491678807 -0.0115744092 0.0394269759 0.0498251834 0.1237382450 -0.0346748936 -0.0155544763 0.0049159657 -0.0066688496 0.0015264447 -0.0148374494 0.0017761395 0.0009461363 0.0002699378 0.0008351914 0.0002716081 -0.0053410537 0.0044732316 -0.0075646686 -0.0064606774 0.0021562780 0.0017746661 0.0056680147 0.0041978227 0.0007455149 0.0069008097 0.0089689728 0.0093806690 0.0068152271 -0.0021502975 -0.0027631974 -0.0107713593 -0.0109848684 0.0012140525 0.0039913826 0.0193938696 0.0321620868 -0.0108287621 0.0032709251 -0.0096012630 0.0052156162 0.0005990391 -0.0018137463 0.0020827236 -0.0010526227 0.0012961137 0.0017797448 0.0010970138 -0.0029257653 -0.0001369691 -0.0018053451 0.0041308954 -0.0186725395 0.0085631022 -0.0252533593 0.0009271640 0.0031422123 -0.0074857480 0.0017728040 -0.0014597805 -0.0004439573 0.0010484720 -0.0019038192 -0.0002425371 -0.0018798844 -0.0005248991 0.0020713532 0.0001757959 0.0026082901 -0.0023705548 -0.0009600880 -0.0006155082 0.0033220084 0.0000278799 0.0015076541 -0.0009515537 -0.0041391803 -0.0033636118 -0.0034825531 0.0109935339 -0.0030909487 0.0115774388 -0.0115641526 0.0113551146 -0.0101983342 0.0017762644 -0.0020389392 -0.0019092680 0.0024059188 -0.0010535691 0.0075934615 -0.0623430922 0.0584014527 -0.0844978937 -0.0019481163 0.0045525547 -0.0025671837 -0.0012988889 0.0030166404 -0.0015948743 -0.0017428465 -0.0041303720 0.0026241862 0.0011203261 -0.0006910302 -0.0005840079 -0.0012831819 -0.0040208550 0.0023545273 0.0027272113 -0.0000214261 -0.0011122245 -0.0056378012 -0.0030643874 -0.0064256109 0.0000591035 -0.0006781897 -0.0027899755 -0.0047384532 -0.0040191030 -0.0114793071 0.0022109112 0.0039446176 -0.0020267731 0.0066718465 0.0022869295 0.0117626457 -0.0000654792 0.0002192185 0.0037123563 -0.0046341940 0.0087680106 -0.0898102902 -0.0136550220 -0.0092728017 -0.0046861946 0.0140117225 -0.0000327406 -0.0030911476 0.0025541716 0.0120523782 0.0060233532 0.0136962489 0.0063619177 -0.0012770818 -0.0051013211 -0.0011285955 0.0014977467 0.0023720983 -0.0008724615 -0.0011021461 0.0013776009 0.0000729771 -0.0009721218 0.0006165963 0.0001148619 -0.0010796823 -0.0032512566 -0.0028884797 0.0004350785 -0.0028865268 -0.0014423857 0.0004587017 0.0020262795 -0.0059467746 0.0018657993 0.0003200920 -0.0008528361 0.0048643588 -0.0073114738 0.0097473888 0.0027975355 -0.0013685708 -0.0010434500 0.0026226028 -0.0005650123 0.0045208735 -0.0055541760 -0.0020066427 0.0017684634 -0.0019098880 -0.0014653007 -0.0012232156 0.0008384038 -0.0007172522 0.0016804148 0.0031503708 -0.0012480729 -0.0031272240 -0.0026926561 0.0103762362 -0.0121466108 -0.0094770388 0.0021392162 0.0184672778 0.0099891863 0.0096638434 -0.0111082820 -0.0113387402 0.0073287405 -0.0035958759 0.0002967022 0.0012263050 0.0059178849 0.0044926084 -0.0081905641 -0.0072590613 -0.0091621908 0.0025218497 -0.0004918559 -0.0005953997 -0.0008673704 0.0092525203 0.0105979528 -0.0031913186 -0.0032701059 -0.0057429285 0.0095374764 -0.0016952130 0.0157618180 0.0030302943 -0.0060314729 -0.0227199243 -0.0009572546 0.0001143689 0.0003556174 0.0129393816 0.0099445241 0.0159195874 0.0042108919 -0.0111667511 -0.0095535813 -0.0049729394 0.0054922629 0.0201315505 0.0219990370 0.0012766991 -0.0279067520 -0.0063658260 -0.0029925968 -0.0021023078 -0.0045343478 0.0058898559 0.0344804836 0.0107830089 0.0016868461 -0.0194039315 -0.0293443209 -0.0142621031 0.0287130569 -0.0035644427 -0.0143809496 -0.0648992502 0.0022511881 0.0008412659 0.0011518090 -0.0484707375 -0.0015716984 0.0427575339 -0.0033753634 -0.0228717370 -0.0425998899 0.0004047106 0.0008521403 0.0013474377 -0.0004139694 -0.0007459162 -0.0014813632 -0.0015721550 0.0012528784 0.0028751926 0.0022262155 -0.0009156648 -0.0030951286 -0.0020463712 0.0015415233 -0.0014878597 -0.0041322849 0.0021128294 0.0028944316 0.0000926972 0.0003393380 0.0055626249 0.0010720914 0.0005085057 -0.0087440385 -0.0093674716 -0.0121185479 -0.0262853271 0.0052263205 0.0260658827 0.0359563331 -0.0002423401 -0.0080058597 -0.0034564274 0.0032040173 0.0013719732 0.0079707561 0.0102719647 0.0062181556 0.0373106192 -0.0039989413 -0.0153908419 -0.0446308149 0.0142189931 -0.0011458263 0.0097764953 0.0002378276 0.0050311891 0.0080953591 -0.0539917846 0.0133890695 0.0393007250 0.0629653149 -0.0531389470 -0.0529836766 0.3287709699 -0.1516004908 -0.1563679500 -0.4328190168 0.1842871203 0.2613332329 0.0434510436 -0.0133517933 -0.0298525760 -0.0687588311 0.0448051956 0.0284185077 -0.2180322506 0.1451293732 0.1704384374 0.3711683768 -0.1507087629 -0.2503541532 -0.0008287402 -0.0251704433 -0.0376480559 -0.1694531058 -0.1351137377 0.0585051701 0.0622695006 0.0714895953 0.0673216553 0.0484413743 0.1089564693 0.0511631109 -0.0020604414 0.0094519426 0.0370804789 0.1247469654 -0.0827799523 -0.0878676659 -0.0691439695 -0.0020869807 -0.0539056235 -0.1623883424 0.0670861404 -0.0051426644 -0.0013247873 0.0012415298 -0.0004114510 0.0016347796 -0.0023576525 -0.0025319993 -0.0004424368 -0.0007583234 0.0011310883 0.0018749353 -0.0014849118 0.0024202534 0.0048346123 0.0001216744 -0.0009691251 -0.0009709704 -0.0041029107 0.0013007334 -0.0067712766 -0.0006520234 -0.0029620893 0.0018440122 -0.0004581482 -0.0042914730 0.0010495499 0.0041332812 0.0002021876 -0.0178192757 0.0045241569 -0.0042466724 0.0066253663 -0.0022734584 0.0041251794 -0.0014331360 0.0006085859 0.0013335544 -0.0016640387 0.0011303042 -0.0010809857 -0.0034647153 -0.0026985927 0.0044971771 0.0008997901 0.0021595177 -0.0068451334 0.0349475433 -0.0160213559 0.0520714290 0.0021055327 -0.0069739986 0.0175221525 -0.0033249651 0.0025742457 -0.0002306496 -0.0022352996 0.0033525016 0.0001058221 0.0034029439 0.0002209801 -0.0029504750 0.0003917444 -0.0040608015 0.0047934791 0.0006428777 0.0010506854 -0.0061464762 0.0002010418 -0.0016779632 0.0017763592 0.0042566330 0.0034189551 0.0000398139 -0.0215072813 0.0075191124 -0.0239149867 0.0226584275 -0.0246843321 0.0215335574 -0.0032684060 0.0033922660 0.0033925409 -0.0042863007 0.0026543225 -0.0155536874 0.1261071154 -0.1171939635 0.1720452462 0.0041328903 -0.0091507795 0.0052116974 0.0028795367 -0.0063713819 0.0029191580 0.0035798641 0.0086089780 -0.0054437313 -0.0029165590 0.0012938017 0.0015567212 0.0025744179 0.0079732993 -0.0047852364 -0.0056362573 0.0000099371 0.0024985217 0.0118351133 0.0063066831 0.0134380400 -0.0010980003 0.0022804304 0.0053807065 0.0104462336 0.0073806583 0.0228665945 -0.0050007357 -0.0076468957 0.0033611982 -0.0123541143 -0.0047062369 -0.0234315818 -0.0003623581 -0.0003957031 -0.0049707993 0.0064966636 -0.0109232552 0.1156975704 0.0050608351 0.0033707094 0.0025541726 -0.0295653673 -0.0008176532 0.0057853632 -0.0037947762 -0.0249913507 -0.0130659787 -0.0272708232 -0.0126024046 0.0026825613 0.0099134129 0.0020095485 -0.0027473458 -0.0044456134 0.0015703342 0.0020507512 -0.0026856291 0.0000249678 0.0020514458 -0.0010861795 0.0000050540 0.0019354944 0.0056710278 0.0042658462 -0.0014733284 0.0054284670 0.0048588716 0.0003626532 -0.0041664563 0.0119064712 -0.0042622977 -0.0007428857 0.0021730928 -0.0095237870 0.0123867143 -0.0172685153 -0.0050508889 0.0032063134 0.0025262047 -0.0055096548 0.0007681924 -0.0085408872 0.0081478753 0.0042095676 -0.0036456518 0.0039979620 0.0025480203 0.0023779600 -0.0010823587 0.0014860250 -0.0031291362 -0.0056093488 0.0021936453 0.0049941825 0.0044438240 -0.0206026850 0.0257451695 0.0196963329 -0.0045029425 -0.0342213192 -0.0184046825 -0.0191700542 0.0237740517 0.0234738063 -0.0020515206 0.0009777923 -0.0002705424 -0.0001409579 -0.0015271749 -0.0031647945 0.0027426354 0.0020553053 0.0047544491 -0.0008201343 0.0002844569 0.0000457041 -0.0001078676 -0.0031901475 -0.0044639480 0.0013767266 0.0013919419 0.0032349106 -0.0113769304 -0.0059745426 -0.0022585864 0.0008817793 0.0084878819 0.0039860615 0.0004631368 -0.0003405797 -0.0001786764 -0.0089460821 -0.0048554550 -0.0063888766 -0.0014139030 0.0079917196 0.0033036734 0.0032172834 -0.0031473239 -0.0183112597 -0.0110943285 -0.0012832044 0.0193994498 0.0038470037 0.0023751313 0.0012419524 0.0042388485 -0.0034610109 -0.0228509346 -0.0084608014 -0.0008861624 0.0156933942 0.0257479164 -0.0005322041 -0.0213400629 0.0108723499 0.0320713798 0.0559396922 -0.0013420193 -0.0005396698 -0.0009367539 0.0391012725 0.0055372235 -0.0301902926 0.0053874972 0.0189773061 0.0375918282 -0.0002948264 -0.0004672554 -0.0008676561 0.0003289735 0.0005312188 0.0010164701 0.0008832520 -0.0007379779 -0.0016544023 -0.0016579304 0.0004609572 0.0018897596 0.0006080081 -0.0003185390 -0.0005242645 0.0013631169 -0.0005180644 -0.0000107913 0.0013869397 0.0020545468 0.0050793288 -0.0028464638 -0.0053808832 -0.0068006341 0.0005118777 -0.0124890023 -0.0307877312 0.0083683394 0.0096948698 0.0468936556 -0.0009663248 0.0007406715 -0.0065293237 -0.0001346850 0.0048891669 0.0083557189 0.0120414840 0.0155398267 0.0335828460 -0.0113310014 -0.0171522409 -0.0495587660 -0.0002788000 -0.0004065338 -0.0088034884 -0.0037188370 -0.0002243410 0.0008423718 -0.0257908986 0.0126324953 0.0181902266 0.0391468137 -0.0160674372 -0.0225181421 0.1700180448 -0.0703729893 -0.0812903236 -0.2085175675 0.1051527548 0.1326432520 0.0204261653 -0.0140158834 -0.0105119745 -0.0326539566 0.0178545692 0.0192904860 -0.1124303104 0.0629384900 0.0858977982 0.1803275045 -0.0893090872 -0.1174978467 0.0026115130 0.0528878635 0.0803443400 0.3589075785 0.2885908794 -0.1254032187 -0.1294062556 -0.1480429176 -0.1445801112 -0.1061437249 -0.2331154532 -0.1083780685 0.0031350724 -0.0205239226 -0.0781240073 -0.2641014577 0.1775696498 0.1866800608 0.1415657042 0.0080577413 0.1156979950 0.3470403176 -0.1421791477 0.0098954150 -0.0344002979 0.0458084972 -0.0144730443 0.1226867401 -0.0165856686 -0.0245654160 0.0051234136 -0.0003851701 0.0033694901 0.0557714342 -0.0205331283 0.0170335598 0.0291033163 -0.0220909094 0.0007427312 -0.0233832343 -0.0245056901 -0.0164512024 -0.0483185676 -0.0301364775 -0.0088181619 -0.0024005392 -0.0020353336 -0.0041635978 0.0283646887 0.0424201556 0.0010736363 -0.0767658651 -0.0224439038 -0.0693639468 0.0281438166 -0.0043815084 0.0357849994 -0.0514597270 -0.0171028262 0.0047067047 0.0008914032 0.0016916177 -0.0009781716 0.0039023717 0.0062134007 -0.0014289638 -0.0036895979 0.0018794130 0.0072651160 -0.0161096538 0.0077625289 -0.0217865212 -0.0040212763 -0.0017514191 0.0003739293 -0.0003110436 0.0000573519 0.0004454605 0.0007476453 -0.0015929299 -0.0002460479 -0.0020232173 -0.0016620684 0.0019970691 0.0025421967 0.0031648070 -0.0006503257 -0.0000781489 -0.0013072603 0.0010786789 -0.0001204789 0.0007503608 -0.0008580690 -0.0048595309 -0.0079927986 -0.0059421727 0.0074653318 0.0014490249 -0.0035611456 -0.0060098454 0.0010718372 -0.0085063182 0.0014587506 -0.0010667547 -0.0013340905 0.0019543865 -0.0012437563 0.0063746612 -0.0507755362 0.0474257774 -0.0725026586 -0.0018381609 0.0040161191 -0.0020339879 -0.0023893986 0.0040836253 -0.0021091850 -0.0032022463 -0.0052556513 0.0017789563 0.0037411725 -0.0001341329 -0.0011344749 -0.0014324878 -0.0037976261 0.0025816509 0.0036908215 0.0001142281 0.0001126484 -0.0051800285 -0.0047002443 -0.0006629682 0.0012553304 -0.0008087142 -0.0066360815 -0.0091356256 -0.0011819911 -0.0103572787 -0.0003381429 0.0066750000 -0.0091117342 0.0076640649 0.0022806159 0.0174510935 0.0006482244 0.0007690139 0.0031740095 -0.0052355527 0.0053555597 -0.0753310041 0.0485337140 0.0318443837 0.0171373756 0.0106841673 0.0003075025 -0.0003264646 0.0000411251 0.0098212857 0.0055054274 0.0089802793 0.0037004974 -0.0010341178 -0.0039973007 0.0000053142 0.0010112180 0.0019235512 -0.0007823023 -0.0007557769 0.0018527584 -0.0000273019 -0.0015069684 0.0008180515 -0.0004903541 -0.0005288598 -0.0011138384 0.0004466169 0.0013114488 -0.0015255936 -0.0040758977 -0.0016124043 0.0026979567 -0.0059724223 0.0026512389 0.0011628953 -0.0025436189 0.0037244449 -0.0045705255 0.0062605916 0.0018207465 -0.0057489763 -0.0036142458 0.0097210569 0.0014259876 -0.0001746511 -0.0025021891 -0.0015518371 -0.0004016417 -0.0006080874 -0.0012445912 -0.0025663656 -0.0017598015 -0.0008189783 0.0020104711 0.0018737808 -0.0016014127 -0.0005655499 -0.0010216080 0.0069321148 -0.0106531411 -0.0076627843 0.0017844978 0.0090043163 0.0045755466 0.0064277106 -0.0096601987 -0.0090389347 -0.0570375791 0.0292308915 -0.0028018880 -0.0182041905 -0.0718150823 -0.0343111142 0.0716371628 0.0776071763 0.0677734678 -0.0250667594 0.0035757566 0.0070944502 0.0034410592 -0.0821533309 -0.0901405892 0.0323768688 0.0364409606 0.0532278854 -0.0225393600 0.0945280487 -0.2202474708 -0.0838892197 0.0022202725 0.2788492401 0.0084464607 0.0016247133 -0.0032083980 -0.1250056531 -0.0731747910 -0.1542781071 -0.0490701104 0.0945258560 0.1084436056 0.0237018248 -0.0210888028 -0.0827903593 -0.0828090672 -0.0008275402 0.1066735213 0.0265114367 0.0123655018 0.0103801364 0.0185636231 -0.0225959750 -0.1305290157 -0.0445726245 -0.0051672693 0.0773742141 0.1347546739 0.0739123662 -0.1238296836 0.0176373248 0.0311755386 0.2433524002 -0.0098826840 -0.0040468489 -0.0040861003 0.1902312349 0.0120579157 -0.1643898095 0.0176822817 0.0837372918 0.1742816478 -0.0021537573 -0.0069334893 -0.0095022760 0.0030947044 0.0046710339 0.0101798107 0.0062071092 -0.0058376964 -0.0130501194 -0.0084631180 0.0040027201 0.0124595970 0.0222864823 -0.0081622322 -0.0008377646 0.0581958391 0.0063974419 -0.0142290493 0.0072254817 -0.0169896935 0.0333205391 -0.0324392588 -0.0524727896 -0.0217145953 0.0411371819 -0.0893298100 -0.1356324255 0.0461764127 -0.0263080282 0.2627337958 -0.0071489231 0.0269158225 -0.0502239372 -0.0373115819 0.0619738458 0.0417260148 0.0866487201 0.1216952636 0.1953841349 -0.0964681525 -0.0501868520 -0.2959271662 -0.0206555065 -0.0089593643 -0.0420211027 -0.0146218356 -0.0117235170 -0.0091865526 -0.0037621439 0.0382694564 -0.0035966698 0.0355687086 0.0248380675 0.0026231651 0.0859041785 0.0017724373 -0.0545567693 -0.0489611984 0.0695388537 0.0591985295 0.0026776672 -0.0157011332 0.0013552816 -0.0035848841 -0.0153508810 0.0305873637 -0.0573424785 -0.0031096721 0.0063113022 0.0339262137 -0.1022661458 -0.0055041193 -0.0014495850 -0.0184094130 -0.0300569933 -0.1293128515 -0.1068559474 0.0469143197 0.0449689220 0.0506173788 0.0550142072 0.0435304774 0.0880135066 0.0394155960 -0.0004813815 0.0065349478 0.0281231893 0.0990595028 -0.0650770412 -0.0698207343 -0.0496454066 -0.0034090115 -0.0408038043 -0.1249505521 0.0528808243 -0.0068311092 0.0016912346 -0.0056241051 -0.0002491803 -0.0228497174 -0.0025291583 -0.0045032007 -0.0014737508 -0.0000366747 0.0044953667 -0.0128939020 -0.0036604526 -0.0085049941 -0.0051195508 0.0053648888 0.0011394602 0.0063261282 0.0089768696 0.0027412870 0.0107959882 0.0067069809 0.0011548905 0.0000462895 -0.0008077916 0.0028326009 -0.0025756482 -0.0056418141 -0.0002928289 0.0144050345 0.0010308468 0.0120890441 -0.0061248105 0.0005594750 -0.0072412262 0.0096143467 0.0030514345 -0.0010180981 0.0003531283 -0.0003949943 0.0005600444 -0.0009508022 -0.0013249731 0.0003840349 0.0005984752 -0.0002750692 -0.0015803069 0.0022350221 -0.0011180177 0.0037911341 0.0028658712 0.0003836120 0.0008445760 0.0001889184 -0.0001173440 -0.0005759812 -0.0001482250 0.0002142853 -0.0000276008 0.0004287197 0.0001980858 -0.0000385958 -0.0004719826 -0.0004871611 0.0000981912 -0.0003264680 0.0002936753 0.0000674626 0.0000759760 0.0001727924 0.0001323220 -0.0003020110 0.0012461564 -0.0010221058 -0.0016404090 -0.0001099136 0.0009938458 0.0006533466 0.0002757333 0.0018381016 -0.0001843957 0.0000313906 0.0001389934 -0.0002399260 0.0002941636 -0.0011170765 0.0084973244 -0.0077973680 0.0124731668 0.0003380069 -0.0006559920 0.0003518224 0.0003654347 -0.0005824703 0.0003746237 0.0004145849 0.0007199211 -0.0003042904 -0.0005114372 0.0000333918 0.0002216283 0.0001550946 0.0005753787 -0.0004955342 -0.0005884497 -0.0000194027 0.0000165377 0.0007611629 0.0006358204 0.0003183375 -0.0002577109 0.0004579921 0.0007846849 0.0018091382 0.0000117334 0.0022852121 0.0000321546 -0.0009196534 0.0014484854 -0.0010728419 -0.0001946089 -0.0027844141 -0.0002840406 -0.0001595928 -0.0000970307 0.0005719817 0.0001688794 0.0012048874 -0.0106081277 -0.0088046814 -0.0039820224 -0.0019162727 -0.0003467360 -0.0003080483 0.0005623472 -0.0018754897 -0.0012360260 -0.0011412801 -0.0003974513 0.0002156637 0.0004992850 0.0000110007 -0.0001200572 -0.0002128667 -0.0000157650 0.0001070877 -0.0002410078 0.0000021160 0.0002280566 -0.0001082346 0.0000451286 0.0000527457 -0.0001800765 -0.0008074853 -0.0005106909 0.0000678880 0.0014812439 0.0008556110 -0.0003337927 0.0010503105 -0.0006991767 -0.0002663865 0.0005940200 -0.0004972638 0.0003964564 -0.0004357032 0.0000568256 0.0006740556 0.0004414831 -0.0009969743 -0.0002679258 0.0001127291 -0.0001508863 0.0002629918 0.0000855462 0.0000510581 0.0001870862 0.0003817461 0.0003479917 0.0000881970 -0.0002469068 -0.0002138894 0.0002059901 -0.0000890485 0.0000471181 -0.0009395220 0.0021544647 0.0014241133 -0.0003706548 -0.0000200467 0.0000478572 -0.0008287432 0.0021372734 0.0016739423 0.0062318511 -0.0038202272 0.0006367631 0.0033144290 0.0133781487 0.0086889612 -0.0101695235 -0.0129420314 -0.0116438107 0.0043203841 -0.0008536360 -0.0012074779 0.0004822412 0.0130788713 0.0151294691 -0.0062892683 -0.0071743154 -0.0112475535 0.0103256959 -0.0109568126 0.0385225716 0.0197879673 -0.0089186462 -0.0469211933 -0.0014597095 -0.0001519768 0.0004947590 0.0282874126 0.0118403594 0.0278051353 0.0100434620 -0.0232766811 -0.0209721586 -0.0118249333 0.0095857746 0.0406496317 0.0285951031 -0.0016438468 -0.0427111633 -0.0109312871 -0.0052317953 -0.0044574290 -0.0099671089 0.0068908010 0.0500361303 0.0208427036 0.0023389769 -0.0374100175 -0.0682857741 -0.0351762794 0.0612427186 -0.0217924631 -0.0251008138 -0.1119412899 0.0041134660 0.0016579304 0.0017397772 -0.0938824982 -0.0119425656 0.0664502323 -0.0099193315 -0.0428020513 -0.0866913799 0.0002416149 0.0012046687 0.0016620113 -0.0006173946 -0.0007644071 -0.0016822958 -0.0021920415 0.0024571362 0.0052290635 0.0035602632 -0.0014335657 -0.0048000170 0.0006661830 0.0026656334 -0.0045684367 -0.0077113030 -0.0019519618 0.0172632410 0.0130579791 0.0140121151 0.0360543579 -0.0261244744 -0.0432386366 -0.0565810530 0.0250502804 -0.0931691926 -0.2271354046 0.0598682231 0.0959554280 0.3847859587 -0.0065466005 -0.0200356402 -0.0874779511 0.0108576759 0.0461759182 0.0939962943 0.2070993202 0.1863559574 0.4767009035 -0.0983135181 -0.1794043710 -0.5537738076 0.0030291067 0.0024411960 0.0089925158 0.0031344446 0.0018293415 0.0019169729 0.0121616190 -0.0115411096 -0.0068875202 -0.0196868527 0.0001426672 0.0067473829 -0.0823015631 0.0295129575 0.0432198708 0.0767260563 -0.0485912137 -0.0528750343 -0.0045730928 0.0062440341 0.0016559451 0.0085132058 -0.0015943778 -0.0102466645 0.0342302614 -0.0123468917 -0.0198672600 -0.0488517361 0.0416245105 0.0291480928 0.0004659807 0.0032543227 0.0056818682 0.0237487227 0.0202622932 -0.0090255002 -0.0076489385 -0.0084529730 -0.0106470374 -0.0088486567 -0.0167838958 -0.0072630220 -0.0002953195 -0.0011414401 -0.0048967567 -0.0179828268 0.0123443786 0.0128044317 0.0076785936 0.0013613708 0.0074308069 0.0231495644 -0.0096433823 0.0014246543 -0.0124656883 0.0124485388 -0.0055239190 0.0193353188 -0.0111007513 0.0011198800 -0.0024956846 -0.0078256146 0.0047753822 0.0152476939 0.0208621174 -0.0219340265 -0.0099657861 0.0177703710 -0.0036796126 -0.0020419859 -0.0118106861 0.0039909044 0.0147910075 -0.0102951535 0.0305321068 0.0006735114 0.0074178650 -0.0053337743 -0.0210704091 -0.0253392280 -0.0015182592 0.0397122552 0.0196249759 0.0296642637 -0.0180116637 0.0082883699 -0.0174602739 -0.0094475283 -0.0090531996 -0.0014055195 0.0036959752 -0.0005461148 0.0020907754 0.0026423830 0.0022536482 -0.0030859067 0.0006886336 -0.0029814739 0.0038142117 -0.0081225775 0.0039974357 -0.0080989877 -0.0064400361 -0.0013260961 -0.0023867812 -0.0001163421 -0.0001404236 0.0009574563 0.0002248231 -0.0009967845 -0.0003624046 -0.0013093945 -0.0009685873 0.0007718759 0.0015876013 0.0021937924 -0.0003459749 0.0001619253 -0.0007852990 0.0000857114 -0.0001116035 0.0005459338 -0.0001557604 -0.0018384347 -0.0050352486 -0.0020204682 0.0045188131 0.0012104286 -0.0017545978 -0.0019012618 -0.0013707904 -0.0039692410 0.0006869267 -0.0009258520 -0.0008652476 0.0014082667 -0.0001415831 0.0027774956 -0.0224789919 0.0217475287 -0.0308235740 -0.0003543906 0.0014136563 -0.0009526903 0.0009255396 -0.0003831123 0.0001143317 0.0007455423 0.0000481848 0.0012560913 -0.0021549047 -0.0005029786 0.0002935452 -0.0002584963 -0.0010415474 0.0002476414 -0.0003621077 -0.0000935916 -0.0011658087 -0.0011656825 0.0003608226 -0.0064459029 -0.0007351453 0.0006505366 0.0035869618 0.0028589204 -0.0033087484 -0.0026577372 0.0024327471 -0.0006147910 0.0055653339 0.0009166530 0.0007744995 -0.0033906974 -0.0005171212 0.0004420495 0.0026077014 -0.0029014348 0.0049996006 -0.0615717175 -0.0080156511 0.0054207324 -0.0018191898 0.0030040915 0.0004604613 0.0007443070 -0.0011536580 0.0038498835 0.0025342822 0.0021314790 0.0007141096 -0.0005155552 -0.0012245847 -0.0003037762 0.0010409102 0.0008820723 -0.0001324439 -0.0010162387 0.0011200574 -0.0000641883 -0.0005568071 0.0002366842 0.0002872346 -0.0006435211 0.0003011885 0.0016579033 0.0010145853 -0.0001359087 -0.0030535650 -0.0016356654 0.0007175423 -0.0037123517 0.0014517611 -0.0002290263 -0.0003789352 0.0026617831 -0.0040576579 0.0055724655 0.0010489051 -0.0006344204 -0.0010562668 0.0014425544 -0.0011865562 0.0044984688 -0.0062222940 -0.0015148391 0.0023606724 -0.0020185110 -0.0008617127 -0.0004326977 0.0007781987 0.0001771930 -0.0000247526 0.0012379883 -0.0002215179 -0.0026871715 -0.0019845908 0.0018194536 -0.0044427314 -0.0028772073 0.0007391435 0.0002498344 -0.0000590023 0.0017459702 -0.0043745966 -0.0033323770 0.0080436996 -0.0121806123 0.0095973446 0.0259890654 0.1058295322 0.0792279350 -0.0561717162 -0.0906439767 -0.0790815504 0.0321275497 -0.0070120724 -0.0073403667 0.0185382204 0.0802306664 0.0984733830 -0.0540610773 -0.0645300991 -0.0995754772 0.1202950025 -0.0576211059 0.2998410807 0.1832828490 -0.1078348862 -0.3346088304 -0.0108547820 -0.0001277649 0.0031698600 0.2808989356 0.0621016837 0.2196805841 0.0901313853 -0.2115751670 -0.1875858915 0.0328375449 -0.0246191334 -0.1103175808 -0.0460457835 0.0104512356 0.0902278435 0.0243941487 0.0120001896 0.0105208639 0.0295436399 -0.0077458585 -0.0985771932 -0.0543815190 -0.0057990131 0.1000471704 0.1927389775 0.0968405908 -0.1692375747 0.0949687942 0.0896573085 0.2840763242 -0.0093608461 -0.0038234818 -0.0039402162 0.2564164496 0.0506759631 -0.1433079335 0.0328497697 0.1206975748 0.2420257454 0.0006908428 0.0082832833 0.0113172378 -0.0056003303 -0.0051171518 -0.0116191961 0.0037807593 -0.0056378942 -0.0113637833 -0.0080893669 0.0026181624 0.0096167064 0.0021211910 -0.0000438487 -0.0014008521 0.0253600222 0.0164835416 -0.0049267590 -0.0006085569 -0.0209902195 0.0145108208 -0.0011366302 -0.0063600758 -0.0089110980 -0.0026619329 -0.0368258943 -0.0213591275 0.0101566936 0.0140112356 0.0560996467 -0.0015656316 -0.0082224726 -0.0144650101 -0.0172818248 0.0212931635 0.0133239802 0.0282828094 0.0311599770 0.0888558063 -0.0322985686 -0.0093495756 -0.0926352549 0.0198679249 -0.0083095469 0.0379916224 0.0052921694 0.0036664398 0.0040515840 -0.0007042382 -0.0045463653 0.0009891050 -0.0205624462 -0.0255893649 -0.0118334565 -0.0096014890 -0.0062970649 -0.0011152079 -0.0180172164 -0.0329804221 -0.0085519234 0.0040803771 0.0246233019 -0.0138133153 -0.0003175222 0.0062365508 -0.0039873323 0.0084325939 0.0265661625 -0.0121649096 0.0085324436 0.0214387640 -0.0076142167 -0.0004865168 -0.0054803980 -0.0095715670 -0.0397357862 -0.0335585616 0.0148628231 0.0134201591 0.0147559621 0.0176833705 0.0151485385 0.0283645027 0.0123477354 0.0005803325 0.0010268682 0.0086580155 0.0338076189 -0.0212774719 -0.0233455154 -0.0162727597 0.0001373578 -0.0119047077 -0.0385230318 0.0173669862 -0.0048275776 0.0017189756 -0.0022248340 0.0006323343 -0.0059490651 0.0005648773 0.0008126119 -0.0001322876 -0.0000201235 -0.0000294079 -0.0020950905 0.0009494399 -0.0007035299 -0.0006091687 0.0009201816 -0.0000756894 0.0009988351 0.0004305604 0.0011351542 0.0016034960 0.0014675377 -0.0001099396 -0.0000600487 0.0001986003 -0.0002773575 -0.0015334156 -0.0019834900 -0.0001588210 0.0028619356 0.0011922611 0.0025658774 -0.0006493747 0.0000487367 -0.0013382226 0.0019715514 0.0007263323 -0.0001360654 0.0000516182 0.0001493197 -0.0000048225 -0.0009073825 -0.0009074652 0.0008718433 0.0001801189 0.0002772268 -0.0013161358 0.0167159776 -0.0099905678 0.0179584050 -0.0017992310 -0.0011361652 0.0007966487 -0.0003903756 0.0002077858 0.0003203793 -0.0012341583 0.0011307349 0.0013456570 0.0019463949 0.0003241689 -0.0014656257 -0.0008469843 -0.0014260230 0.0003759984 0.0010483641 0.0003770811 -0.0009639424 -0.0003003050 -0.0002023165 0.0003479691 0.0029121690 0.0005173367 0.0002234999 -0.0034583878 -0.0002838961 0.0002102909 0.0024196312 -0.0016100822 0.0006824240 -0.0024929997 0.0009006422 0.0008314781 -0.0015434018 0.0015393440 -0.0025924745 0.0149210763 -0.0128596549 0.0134025478 0.0014829229 -0.0009568620 0.0010572130 -0.0541870576 0.0389871258 -0.0808001190 -0.0084915633 -0.0154436439 -0.0152672883 -0.0041626446 0.0023595720 -0.0531809158 0.0570480023 -0.0047172384 0.0982405587 0.0085511512 -0.0125448082 0.0555239485 0.0654114639 -0.0493587944 0.0939893948 0.1367268782 -0.0825997707 0.2472085724 -0.2200196663 0.0621462737 -0.6287661785 -0.1387698082 0.0048943011 -0.2941716969 0.1927770276 -0.0441577265 0.5204461572 0.0000559635 0.0002086656 -0.0007363566 0.0009182381 -0.0015344783 0.0132614705 -0.0016143773 -0.0008194495 -0.0005176192 -0.0004285271 -0.0005259873 0.0021666986 -0.0011377547 -0.0043521997 -0.0017010880 -0.0028855128 -0.0006585259 0.0005219947 0.0017373429 0.0005456855 -0.0012531165 -0.0009308064 -0.0000758865 0.0009111892 -0.0019033405 -0.0002338840 0.0005253162 -0.0006092917 -0.0001304154 0.0008232944 0.0013078821 0.0006872782 -0.0002671964 0.0005457221 0.0004730258 -0.0000232608 -0.0004850556 0.0030360236 -0.0011048595 -0.0004319550 0.0015165921 -0.0024871572 0.0037773933 -0.0045578739 -0.0004632280 0.0028465542 0.0027824766 -0.0005478249 -0.0019447843 0.0003636299 0.0008369439 0.0055950563 -0.0054867930 0.0028570461 0.0010297823 0.0010386088 -0.0006251034 0.0003844082 -0.0013701440 -0.0023165553 0.0012056150 0.0020411596 0.0020962506 -0.0024989548 0.0029377207 0.0022659270 -0.0007459313 -0.0066877254 -0.0024391278 -0.0016894673 0.0026681081 0.0021167887 0.0022540285 -0.0009719840 -0.0000709802 0.0005364373 -0.0007414810 -0.0018691768 -0.0013268299 -0.0006315551 0.0003564370 -0.0007893227 0.0006529097 -0.0002901170 -0.0007036664 0.0007243506 0.0004233102 0.0007842707 0.0008101946 0.0014563356 -0.0035729996 -0.0045343763 0.0005664725 -0.0021492079 0.0083097593 -0.0032117508 -0.0002259451 0.0004499175 0.0021764357 -0.0029538994 0.0010180223 -0.0004873425 -0.0010684693 0.0036292881 0.0024329290 0.0005350670 -0.0003844609 -0.0021112506 0.0004060116 0.0004059280 0.0007564836 0.0002263132 0.0001281787 0.0001107963 0.0006926615 0.0002771227 -0.0004656146 -0.0009522218 -0.0000566385 0.0018449436 0.0036911419 0.0012710434 -0.0031282603 0.0036699388 0.0030832243 0.0053155474 -0.0001082885 -0.0000251500 -0.0000614811 0.0051427731 0.0017442081 -0.0013697072 0.0010020234 0.0025921435 0.0050635536 0.0008448794 -0.0006841693 -0.0003088317 -0.0005176483 -0.0004065105 -0.0009287341 -0.0000034272 -0.0000715428 -0.0000911946 -0.0000945840 -0.0000047065 0.0000577361 -0.0010101701 0.0004024933 -0.0000259199 -0.0024308613 -0.0000937129 0.0007332666 -0.0002536942 0.0011138071 -0.0002967657 0.0011573030 0.0015930795 -0.0009916640 -0.0034112585 0.0012156105 -0.0006378491 -0.0003666298 0.0057635921 -0.0008848272 -0.0002564524 -0.0018754662 0.0000165166 0.0019465840 -0.0018437067 0.0009278136 -0.0001902893 -0.0002965660 0.0047413855 0.0007276643 -0.0043911149 -0.0017342810 0.0007723589 0.0006998736 0.0010848883 0.0004942302 0.0005234800 0.0002968023 0.0000699465 -0.0018615562 0.0007310305 -0.0011669823 -0.0013689022 -0.0001908660 -0.0012456962 -0.0004517964 0.0034743999 0.0003072947 -0.0025430203 -0.0008601965 0.0002235382 0.0002195346 0.0002904754 -0.0002794161 0.0012437149 -0.0015964259 0.0025692496 0.0008802843 0.0022932270 0.0009632230 0.0054233534 -0.0014883714 -0.0016189421 0.0041463896 0.0000877709 0.0114944043 0.0016930781 0.0011270377 -0.0104621714 -0.0142706030 0.0021979016 0.0083897444 0.0026648808 -0.0027458032 0.0003091737 0.0020391779 -0.0036936191 -0.0159561617 0.0048637915 0.0089709129 0.0155311203 -0.0069412089 0.0019165454 0.0067716480 -0.0059685236 0.0055461887 0.0642028217 -0.0783359904 0.0241300659 -0.1878457613 0.0280019023 0.0290856033 0.0029696888 0.0055974605 -0.0052782990 -0.0634608919 0.0412798686 -0.0348213869 -0.0414283164 0.0156906318 0.0062498377 0.0317723147 0.0185626220 0.0255967120 0.0613894545 0.0545547028 0.0092732961 -0.0005794290 0.0052831354 -0.0063351512 -0.0654688938 -0.0836413991 -0.0057651481 0.1293941440 0.0494184116 0.1208398470 -0.0417841712 0.0106736976 -0.0516717562 0.0636882997 0.0230508277 -0.0083048954 0.0005603853 -0.0025190877 0.0001743657 -0.0032053238 -0.0055493634 -0.0014983002 0.0048455531 -0.0038399640 0.0008309237 -0.0017841430 0.0008942745 -0.0032206472 -0.0054364863 0.0006560672 -0.0055365080 0.0004698780 -0.0003690203 0.0008292332 0.0001346805 -0.0001714977 0.0001210659 -0.0004628219 0.0002200426 -0.0002092407 -0.0000672098 0.0003399780 -0.0004069839 0.0001294226 -0.0001831636 -0.0000052268 -0.0000269649 0.0004885988 -0.0001305858 0.0013165892 0.0002340846 0.0030848258 0.0021793267 -0.0008018343 0.0021356396 -0.0007310840 0.0001313185 -0.0013549122 0.0000952378 -0.0000010417 -0.0000760793 0.0004116127 -0.0004341897 0.0008194735 -0.0052803940 0.0048398671 -0.0082769804 -0.0002536805 0.0004378281 -0.0003641164 0.0022941516 -0.0013556863 0.0037344436 -0.0000469428 0.0000479416 0.0008582651 0.0010397242 -0.0000917684 0.0027262685 -0.0030358123 -0.0000845336 -0.0047272201 -0.0000242345 0.0006546731 -0.0025657702 -0.0036668232 0.0016653868 -0.0042753308 -0.0074711373 0.0039626896 -0.0154764411 0.0098633259 -0.0029516306 0.0311078273 0.0064955207 0.0008888835 0.0129661408 -0.0085687246 0.0025232167 -0.0233719953 -0.0003753943 -0.0004043196 0.0001556384 0.0002724159 0.0032624391 -0.0081192611 -0.0691454175 -0.0347939900 -0.0232502280 0.0004958238 0.0008034591 0.0006444378 -0.0014873519 0.0017465819 0.0014531437 -0.0001877083 -0.0001584750 -0.0002840021 0.0005902344 -0.0006602519 0.0000310773 -0.0002150525 0.0002777909 -0.0000718287 -0.0014402192 0.0001122728 0.0009352374 -0.0002702960 0.0004227179 -0.0002194668 0.0006829579 0.0021699173 0.0010173890 0.0003251386 -0.0027934752 -0.0017022983 -0.0013575952 0.0005110227 -0.0001549670 -0.0003837077 0.0006166487 -0.0000624615 -0.0002160238 0.0002115356 -0.0002827628 0.0058192255 0.0043028240 -0.0071800912 -0.0006720780 -0.0001106301 0.0018136075 0.0017804747 -0.0000229936 0.0000706467 0.0004506024 0.0016378545 0.0021697116 0.0000719043 -0.0002832110 0.0003676845 0.0002381668 -0.0012470154 -0.0007830145 0.0001538271 -0.0024070349 -0.0012690613 0.0003835897 -0.0026338047 -0.0016706701 0.0000525155 -0.0021388333 -0.0013940743 0.0693844812 -0.0287665552 -0.0058878962 -0.0156032362 -0.0676057605 -0.0674083084 -0.0108012200 0.0389986849 0.0219334995 -0.0156004779 0.0050062518 0.0027828099 -0.0341678652 -0.0117915847 -0.0252492337 0.0402573826 0.0498935331 0.0725716777 -0.1333720586 -0.0053262639 -0.1874543665 -0.1835731833 0.1252472213 0.1651027714 0.0058238045 -0.0010785464 -0.0011658527 -0.2539682670 0.0130703444 -0.1299625512 -0.0840677240 0.1768381523 0.1543064215 0.0252274590 -0.0163999017 -0.0883339669 0.0151973102 0.0184743778 0.0319740518 0.0116074657 0.0064771642 0.0057959589 0.0297754090 0.0115434291 -0.0181255442 -0.0422774581 -0.0018109259 0.0777059397 0.1778931812 0.0777957727 -0.1406172327 0.1367868093 0.1100781203 0.1995723196 -0.0052678944 -0.0022585917 -0.0022209058 0.2151603307 0.0769263452 -0.0568941506 0.0456021527 0.1004559689 0.2170375129 0.0017160791 -0.0036427517 -0.0045491914 0.0042586761 0.0014555000 0.0042735125 -0.0000134815 -0.0032329059 -0.0052633267 -0.0045278671 0.0002663835 0.0030948508 -0.0281895403 0.0162742557 -0.0026507835 -0.0691935864 0.0071546687 0.0200514473 -0.0126200249 0.0204908177 -0.0029557902 0.0383366356 0.0547278324 -0.0338289966 -0.1267873115 0.0245583201 -0.0113043222 -0.0202191135 0.2081028238 -0.0328454024 -0.0095066548 -0.0712345510 0.0020164260 0.0567296130 -0.0531163262 0.0300114018 -0.0093462276 -0.0135162076 0.1723241889 0.0243161269 -0.1263713312 -0.0693718632 0.0400620954 0.0238573457 0.0575266279 0.0236444589 0.0210326100 0.0178606186 0.0035877497 -0.0728444862 0.0341135291 -0.0572843229 -0.0761242691 -0.0122854129 -0.0276269622 -0.0171345553 0.1517730475 -0.0049762726 -0.1390852877 -0.0068928295 0.0136022011 0.0262515848 0.0034393831 -0.0156425518 0.0573449541 -0.0732418328 0.1189946006 0.0610988960 0.1012420719 0.0474441659 0.2360449719 -0.0753903172 -0.0000265735 -0.0016731005 -0.0026572659 -0.0114319549 -0.0093361462 0.0040748181 0.0040000783 0.0044368873 0.0047405987 0.0033517117 0.0075561541 0.0034937459 0.0009920313 -0.0002447352 0.0014864356 0.0076738312 -0.0061222172 -0.0053417769 -0.0033612857 0.0004937557 -0.0023850715 -0.0093286597 0.0037564240 -0.0017857860 -0.0119490990 0.0087425974 -0.0013791362 -0.0179910505 0.0003143076 -0.0073917562 -0.0097303360 0.0023474934 0.0010334984 -0.0086090147 -0.0149181133 0.0269072463 0.0114465727 -0.0071503468 -0.0027046856 -0.0153986957 -0.0087560626 -0.0096708626 -0.0310439099 -0.0097469881 -0.0409711150 -0.0102627786 -0.0044311973 -0.0100828420 0.0115780972 0.0230146376 -0.0070916296 -0.0902814936 -0.0345834842 -0.0910576468 0.0268251086 -0.0079947497 0.0284911137 -0.0007926814 0.0032665259 0.0031703160 -0.0023858815 0.0003210851 -0.0012110736 -0.0031333579 -0.0008391215 0.0033723005 -0.0026348031 0.0032859048 -0.0052397631 0.0024963888 -0.0019820678 -0.0003410988 0.0021888082 -0.0003096954 -0.0008803133 0.0008577787 -0.0008334600 -0.0008790678 -0.0002710724 0.0005205707 0.0004394759 0.0015387524 0.0015695142 -0.0007444127 -0.0016775705 -0.0023080753 0.0003464920 -0.0000315325 0.0009413075 0.0003488108 -0.0004508163 -0.0006789409 0.0002256695 0.0025779086 0.0093522596 0.0043248627 -0.0049958013 -0.0011355852 0.0017757137 -0.0000043712 0.0067991221 0.0030184871 -0.0004175968 -0.0000584044 0.0003176657 -0.0003742437 0.0008657446 -0.0002097506 0.0016622446 -0.0010901362 0.0046632759 0.0003412827 -0.0007114764 -0.0002217811 -0.0020393926 0.0048662531 0.0019798229 0.0016080041 -0.0013474034 -0.0009646946 0.0000624459 -0.0023772149 -0.0000704378 0.0042275464 0.0034255391 -0.0018854248 -0.0050427526 -0.0021755128 0.0017620804 0.0104313673 -0.0070882669 -0.0051825180 -0.0008428817 -0.0122496204 -0.0031843558 0.0151292767 -0.0025999793 -0.0037370293 -0.0059100772 -0.0161829647 0.0005025144 -0.0022647259 0.0061992996 -0.0000134898 0.0009131326 -0.0000217410 -0.0013688437 0.0011708417 -0.0033491109 0.0343383523 0.0181803292 0.0074318345 0.0052944355 0.0000510905 0.0003918819 -0.0003055576 -0.0000723560 -0.0001836878 -0.0000811117 -0.0002288751 -0.0001415641 0.0000274726 0.0001258403 0.0000413388 -0.0001472760 -0.0002608686 0.0003258329 0.0000572631 0.0001340057 -0.0000176830 -0.0000444925 -0.0000134825 -0.0000391174 0.0001476558 0.0000740680 -0.0001580013 -0.0001193572 0.0000883794 0.0002453527 0.0000743014 0.0005439374 -0.0001253707 0.0007553503 0.0004056804 -0.0007697112 -0.0006116568 0.0011450428 -0.0023255794 -0.0012837158 -0.0011443145 -0.0009436918 -0.0001996048 0.0003052522 0.0000279591 0.0013311185 -0.0008547042 0.0003237027 0.0000269705 0.0000829551 -0.0000635192 -0.0003198470 -0.0000108869 0.0000304589 -0.0002698824 -0.0000270086 0.0004088699 0.0003322337 -0.0003347223 0.0004155749 0.0001902477 -0.0000686621 -0.0003586600 -0.0002652404 -0.0002215454 0.0000647805 0.0003480387 -0.0122544398 0.0076459763 -0.0016634906 0.0008599474 0.0051602739 0.0062703333 0.0056819361 -0.0017885516 0.0017239922 0.0005265792 -0.0004202678 -0.0002527363 0.0045056080 -0.0025065230 -0.0017138745 -0.0035661181 -0.0046454382 -0.0047309743 0.0126317683 0.0012068979 0.0162270701 0.0235558888 -0.0126744893 -0.0116015745 -0.0004086876 0.0000571230 0.0000227718 0.0232103380 -0.0059776501 0.0080913214 0.0127582588 -0.0156088987 -0.0178401529 -0.0034198057 0.0029340686 0.0120141186 -0.0079583019 -0.0040102978 0.0001476593 -0.0004829687 -0.0005169694 -0.0009013113 -0.0040371949 -0.0029741909 -0.0031696746 0.0047024239 0.0006244311 -0.0086325037 -0.0235488657 -0.0156366918 0.0216227704 -0.0282697490 -0.0190046717 -0.0271242885 0.0005290135 0.0001357469 0.0002287415 -0.0253977374 -0.0112400770 0.0011869107 -0.0092389757 -0.0172660608 -0.0314099897 -0.0003073590 0.0003442890 0.0003711267 -0.0004054978 -0.0000176755 -0.0002099246 0.0002910908 0.0003482251 0.0003909435 0.0002823507 0.0001419134 0.0000961379 0.0173670575 0.0019832228 -0.0025752933 0.0068016007 -0.0307478916 -0.0016421099 0.0264822008 -0.0208676845 0.0024609960 -0.0528701183 -0.0675110677 0.0361232354 0.2303351831 -0.0374383830 -0.0112188680 0.0122430620 -0.2166162860 0.0634309254 0.0287009285 0.0512515768 -0.0049812355 -0.0356706473 0.0658993776 -0.0313790180 0.1505582003 -0.0103299780 -0.1632541448 0.0453817485 0.2035506885 -0.0112473342 -0.0052038189 0.0362822033 -0.0340039752 0.0079977007 -0.0139280542 0.0238211515 0.0300398578 -0.0477568265 0.0681617301 -0.0605140555 -0.1231713223 0.0131559306 0.1992495870 0.0894902396 0.4135164868 0.0137444883 -0.3159491166 0.1922903679 0.0390343070 0.0547082501 0.0183617237 -0.0373776516 0.0936540334 -0.1281805707 0.2914642527 0.1562474145 0.2924625393 0.0646186718 0.3249231749 -0.1453604012 -0.0000257078 -0.0000911346 0.0006139662 0.0010880860 0.0016402030 -0.0008518093 -0.0003331219 -0.0001719949 -0.0011507497 -0.0024532573 -0.0021742599 -0.0004657020 0.0001685225 0.0001966954 -0.0003311803 -0.0016861074 0.0002422076 0.0009383164 0.0015827614 -0.0009980912 -0.0000472587 0.0002635533 -0.0006853929 0.0008462330 0.0004009809 -0.0003829561 0.0000471601 0.0005566005 0.0000642180 0.0000946669 0.0003599195 0.0000270593 -0.0000689372 0.0001365677 0.0005545313 -0.0009865720 -0.0007043501 0.0000582091 0.0001972018 0.0006205704 0.0003844222 0.0004680114 0.0011691819 0.0003725586 0.0015285315 0.0003843687 0.0001235093 0.0004764023 -0.0003592216 -0.0007903598 0.0003060408 0.0032762996 0.0011499849 0.0032891689 -0.0016541189 0.0005941187 -0.0012755938 -0.0001304083 -0.0003622663 -0.0002462679 0.0013725643 -0.0004503377 0.0014811104 -0.0001964853 0.0001042045 -0.0002657540 -0.0008691602 0.0004507869 -0.0009328571 -0.0010566726 -0.0164374867 -0.0364689605 0.0302270428 -0.0079069206 -0.0122066201 0.0131447947 -0.0131897216 -0.0138886567 -0.0084291319 0.0064518626 0.0079840951 0.0234117731 0.0153868679 -0.0070825026 -0.0192035341 -0.0258058912 0.0032222380 -0.0023489686 0.0118835010 0.0057151459 -0.0057897139 0.0010913144 0.0027878278 0.0172984970 0.0915739366 0.0092471556 -0.0609535466 -0.0112090342 0.0266275366 -0.0050408418 0.0875237834 0.0352826215 -0.0092916946 -0.0049497283 0.0061308068 0.0019509457 0.0249698857 0.0072189503 -0.0457334363 0.0670897166 -0.0131856188 0.0095090663 -0.0140651794 -0.0124743886 -0.0567484262 0.1488306872 0.0615942005 0.0460547166 -0.0480866670 -0.0252801432 0.0013672420 -0.0724836913 0.0057632516 0.1209454946 0.0972009627 -0.0623931487 -0.1527447598 -0.0647124746 0.0507191569 0.3130033576 -0.2245931280 -0.1768167588 -0.0503821379 -0.3543186881 -0.1404001509 0.4724028100 -0.0925884655 -0.0742987654 -0.1712322256 -0.4718086739 0.0324598347 -0.0547667748 0.2023704316 -0.0248115666 0.0021444776 -0.0003140206 0.0005722278 0.0008359726 0.0010468146 -0.0493601540 -0.0006258373 -0.0002500348 -0.0002533489 0.0018810697 -0.0011322826 0.0025251725 0.0003104535 0.0002473430 -0.0014948281 -0.0006973287 -0.0003968639 0.0001555880 0.0000425399 0.0000146559 0.0002346607 0.0001037282 0.0001348065 -0.0002646115 0.0007876011 -0.0000988926 0.0001277716 0.0000036662 0.0001317726 0.0000004397 0.0004967741 -0.0052840091 -0.0028437190 0.0007971747 0.0055383353 0.0029566792 -0.0000168950 -0.0004487339 0.0001277757 0.0000163707 -0.0002645270 0.0005443844 -0.0006230893 0.0009118224 0.0000025205 -0.0019225829 -0.0013460861 0.0023533660 0.0021106289 -0.0046241627 0.0003125720 -0.0029722687 0.0057562120 -0.0037979569 -0.0003258606 -0.0002029173 0.0000977177 0.0003716091 -0.0006115493 -0.0000200805 0.0000153061 -0.0002716405 -0.0001813455 -0.0046305620 0.0051257562 0.0010721123 -0.0012299718 0.0018826631 -0.0021362157 -0.0012098354 -0.0016948508 0.0045596140 0.0003813309 0.0000135391 0.0000093741 0.0000526030 -0.0016717834 -0.0010397630 -0.0000943664 0.0003041758 -0.0002790976 -0.0022620262 0.0008525820 0.0001218336 0.0001460120 -0.0001365915 -0.0002227015 0.0008972880 0.0006605267 0.0012665589 0.0024116619 0.0007691531 -0.0031118163 -0.0010069001 -0.0005824833 0.0010274043 -0.0003240123 -0.0015333306 -0.0005709627 0.0035462412 -0.0003783998 0.0013319124 -0.0008463274 0.0025519362 0.0023333636 0.0002339254 -0.0001225508 -0.0006740573 0.0000312543 0.0001252797 0.0003738040 0.0001254313 0.0000104637 0.0000192477 0.0002214840 0.0001041907 -0.0002805309 -0.0003240982 -0.0000428364 0.0005979737 0.0018737216 0.0009163780 -0.0012106084 0.0009479880 0.0007599781 0.0016410738 -0.0001147596 0.0000007565 -0.0001884054 0.0018886601 0.0004902522 -0.0005178596 0.0002968767 0.0010126459 0.0016838489 -0.0004743721 0.0014872859 0.0015421315 -0.0003911557 -0.0001512240 -0.0003579713 0.0000311804 0.0000230425 -0.0000224191 -0.0000719859 0.0000280236 0.0000666241 -0.0004204826 0.0000263029 0.0000148205 -0.0000887129 0.0010175763 0.0000681881 -0.0006937983 0.0002433310 0.0000561715 0.0013460430 0.0017817205 -0.0009446301 -0.0058073613 0.0006369367 0.0003951257 -0.0005389859 0.0059421237 -0.0017930983 -0.0006878627 -0.0015277003 0.0001690703 0.0008230073 -0.0015603055 0.0007777004 -0.0036253768 0.0000902786 0.0043573187 -0.0010441968 -0.0047759233 0.0000930121 0.0002135883 -0.0013736725 0.0013749314 -0.0002613664 0.0004931319 -0.0008605377 -0.0011536738 0.0018134639 -0.0025912451 0.0022641914 0.0045992046 -0.0005007921 -0.0074521598 -0.0033719762 -0.0155963074 -0.0005484563 0.0118476315 -0.0072136826 -0.0014808261 -0.0019908250 -0.0007389252 0.0014061303 -0.0035257379 0.0048279605 -0.0109821202 -0.0058695872 -0.0111871256 -0.0024768332 -0.0123828880 0.0054575923 -0.0010712087 0.0009228914 -0.0004932462 0.0028906379 -0.0008131879 0.0009294425 -0.0037385887 -0.0057574967 0.0032570575 -0.0009125661 0.0031293028 0.0012668201 -0.0001317874 0.0022425057 -0.0001442648 -0.0037836752 -0.0026750733 0.0006597935 0.0068712235 -0.0045812663 -0.0014002934 -0.0079188388 0.0002828130 0.0043265846 -0.0007933564 0.0014161446 -0.0004271105 0.0068101070 -0.0006735079 -0.0000048828 0.0003172813 -0.0003160928 -0.0000138447 0.0026591529 -0.0001933561 0.0002390801 0.0013457767 -0.0003256717 -0.0000634600 -0.0012621714 -0.0009893832 -0.0012726665 -0.0016080135 -0.0011366646 -0.0003982561 -0.0001662241 0.0001494408 -0.0005498347 0.0004177865 0.0008558656 -0.0002979415 -0.0023635861 -0.0006552339 -0.0027507906 0.0027858309 -0.0010156197 0.0019169109 -0.0009917730 0.0001749954 0.0004211871 -0.0042261888 0.0012411218 -0.0044306138 0.0022560433 0.0009257274 -0.0007806812 0.0032594138 -0.0023992708 0.0054914632 0.0145983051 0.0027489640 -0.0185601308 -0.2678098516 -0.0064162850 0.1072607943 -0.0997564682 0.0835868713 0.0970449530 -0.0125515224 -0.0077732402 0.0053209973 -0.0731047271 -0.0856860363 0.0062152126 0.1007428964 0.1218133916 -0.0206695035 0.0645530747 -0.0534297080 -0.0590666452 0.0213058521 -0.0085024914 -0.0143531075 -0.0374633824 -0.5902561191 -0.1228332714 0.3007266346 0.0553356953 -0.1310371660 0.0698189321 -0.4979411956 -0.2495492864 -0.0034052834 0.0172992709 0.0100141325 -0.0085149414 0.0055556057 0.0072637589 0.0311841147 -0.0258213957 -0.0306168269 -0.0061665094 0.0028887927 0.0017591380 -0.0112894596 0.0209987653 0.0099676849 0.0115467987 -0.0016599577 -0.0048446779 0.0022289932 -0.0112873469 -0.0000915825 0.0186792157 0.0132383127 -0.0095595571 -0.0166910708 -0.0112146971 0.0049391817 0.0569520941 -0.0304214373 -0.0315546328 -0.0062183546 -0.0639168270 -0.0234556245 0.0702862257 -0.0146777902 -0.0124480026 -0.0199534772 -0.0899237710 -0.0010134411 -0.0217428606 0.0217045952 0.0022836663 -0.0028971923 0.0117718653 0.0004813199 0.0040193175 0.0084932352 0.1245620356 0.0009055617 0.0005575609 0.0005691159 0.0004090452 0.0016624326 -0.0047693790 0.0023621467 -0.0025840465 -0.0020254934 0.0000124686 0.0003323835 0.0000019739 0.0002837556 0.0001693929 0.0001472631 -0.0001114324 -0.0001896992 -0.0000320514 -0.0000795022 -0.0002653056 -0.0004303048 -0.0002183574 -0.0000779873 0.0000746941 -0.0005474155 -0.0054364440 -0.0029639345 -0.0004355146 0.0061364953 0.0036445794 0.0006444174 0.0000842950 0.0000197528 -0.0005310500 0.0009455834 -0.0001855340 -0.0000212598 0.0004115032 0.0004350535 -0.0002503237 -0.0003089046 0.0000713668 0.0005425908 -0.0001741055 0.0047415731 -0.0011282016 0.0019554329 -0.0016959365 0.0002376431 0.0002646222 -0.0001340329 0.0001255198 -0.0006380932 -0.0006627113 0.0003577719 0.0001142592 0.0002645711 -0.0006670662 0.0050977633 0.0023774599 -0.0008647022 0.0046205000 0.0027095707 -0.0000154632 0.0031899281 0.0030539962 -0.0012010406 0.0003130391 0.0001071996 0.0001736849 0.0011693192 -0.0001685853 0.0006414442 -0.0006252205 0.0005006740 -0.0005472711 0.0001709311 0.0000229171 0.0003433382 0.0000832413 0.0000020237 0.0000428614 -0.0003601976 -0.0000883752 -0.0053820493 -0.0041608875 0.0037884689 0.0067528788 -0.0026064494 -0.0051630944 0.0000258568 -0.0003133520 -0.0001754730 0.0018409847 -0.0005158527 0.0011580765 0.0021350692 -0.0017479687 -0.0016654093 -0.0006428742 0.0003115521 0.0016875468 0.0007952860 -0.0002086616 -0.0017190071 -0.0006366903 -0.0001128840 0.0000948300 -0.0007712535 0.0001956924 0.0015681986 0.0012656964 -0.0002030192 -0.0017059606 -0.0059242074 -0.0025555799 0.0031448056 -0.0013607486 -0.0017282523 -0.0047977301 0.0003822011 0.0001451508 0.0009580570 -0.0043891673 -0.0035690935 0.0028743500 -0.0015412364 -0.0005077959 -0.0050937486 -0.0001292451 0.0001544458 0.0001074592 -0.0000171418 0.0000845579 0.0001507449 -0.0000214683 -0.0003615487 -0.0001890017 0.0003010282 -0.0001459916 -0.0001364662 -0.0007472332 -0.0007869017 0.0005926897 0.0010381045 0.0013017251 -0.0008918655 -0.0019395961 0.0022803350 -0.0005278852 0.0034938818 0.0040097475 -0.0021686316 -0.0164556394 0.0035807809 0.0006412300 0.0004349339 0.0115285546 -0.0033481605 -0.0023751957 -0.0016774331 0.0001949090 0.0019798296 -0.0045153624 0.0020196448 -0.0137373025 0.0018969010 0.0086127131 -0.0049031599 -0.0156273279 0.0027008246 -0.0001705901 0.0002546254 -0.0011796645 -0.0001324849 -0.0005217463 0.0004918580 0.0009499353 -0.0003957110 0.0015014532 -0.0014371224 -0.0028629086 0.0002860309 0.0054623712 0.0029298120 0.0098889496 0.0006096941 -0.0080047813 0.0051327346 0.0010576577 0.0016604573 0.0002804968 -0.0008598896 0.0019293286 -0.0027574040 0.0072342991 0.0041847697 0.0070824605 0.0010999550 0.0064953762 -0.0031259806 -0.0010416336 -0.0018446225 0.0025491573 0.0007036242 0.0062319631 -0.0041108128 -0.0011630372 -0.0001706967 -0.0049296184 -0.0057745133 -0.0026943738 0.0026878489 0.0018372053 0.0012237719 0.0060711774 0.0200057296 -0.0119923411 -0.0118770535 -0.0095424130 -0.0015155055 -0.0102283077 -0.0238502264 0.0103935730 -0.0009314736 -0.0204487827 0.0386103931 -0.0130057296 0.1917461648 -0.0140726257 -0.0118520363 0.0136267878 -0.0009717303 -0.0024968678 0.0715108419 -0.0132697398 0.0098145681 0.0405636649 -0.0188541545 -0.0001773873 -0.0261197013 -0.0223521619 -0.0212737819 -0.0461572247 -0.0268574238 -0.0113875335 -0.0024463032 0.0002453061 -0.0040648119 0.0226215591 0.0341101911 -0.0019637654 -0.0832670611 -0.0293363351 -0.0861688132 0.0245023401 -0.0038398277 0.0338782694 -0.0545778564 -0.0185332017 0.0063701189 0.0009771914 0.0004215401 -0.0008125971 0.0031507065 0.0052740220 0.0001888039 -0.0028131269 0.0023988439 0.0029406393 -0.0022017520 0.0007475865 0.0004467214 0.0135365226 0.0000560934 -0.0035600170 0.0045099064 -0.0037602025 -0.0046603245 0.0006153148 0.0002844759 -0.0003685943 0.0032040031 0.0036214799 -0.0000384571 -0.0042620347 -0.0052974677 0.0009696257 -0.0032655070 0.0023044417 0.0028541363 -0.0008545378 0.0005907908 0.0005999387 0.0008331979 0.0252260584 0.0038579507 -0.0134183843 -0.0021620333 0.0047373149 -0.0035025677 0.0223008907 0.0114355280 0.0002527755 -0.0008881695 -0.0004980130 0.0004717419 -0.0000948266 -0.0001963088 -0.0029483571 0.0027655532 0.0000527682 0.0003462642 -0.0001313008 -0.0001784814 0.0003492310 -0.0002785199 -0.0001991923 -0.0002958545 -0.0002021667 0.0001383761 -0.0002563668 0.0001735720 0.0001354368 -0.0003400467 -0.0002206928 0.0001081382 -0.0000048803 0.0001997590 0.0000099586 -0.0010417273 0.0002017675 0.0001749067 -0.0001937879 0.0016193113 0.0003565914 -0.0006525385 -0.0000401011 0.0004697800 0.0001540975 0.0020741621 0.0004468230 0.0012012959 0.0001545807 -0.0003458328 0.0003249886 -0.0003441080 0.0004965419 -0.0015124832 -0.0006410822 -0.0173180774 0.0318418690 0.0189788284 0.0105890606 0.0003232263 -0.0006028046 0.0002160960 0.0010150711 -0.0006011921 -0.0007624100 0.0001415861 0.0000394614 0.0000080576 -0.0005598493 0.0002545524 0.0004384688 0.0004549316 -0.0003621416 -0.0002280720 0.0008323529 0.0000501449 -0.0007053421 0.0002582770 -0.0001300498 -0.0001285761 -0.0002459809 -0.0016046585 -0.0008372764 -0.0002004763 0.0017882046 0.0011544305 0.0011590285 -0.0009232227 0.0000895250 0.0000632907 -0.0000492581 0.0004620136 -0.0021148519 0.0024293982 0.0007759989 -0.0035049945 -0.0023254363 0.0044221741 0.0007918244 -0.0012942037 -0.0016964265 0.0003431348 0.0003856532 -0.0008677163 -0.0004392431 -0.0009086540 -0.0006861746 -0.0000255628 0.0002837467 0.0001727627 -0.0004708658 -0.0005625464 -0.0004951582 0.0000220790 0.0013548419 0.0006755236 -0.0002494516 0.0018113394 0.0010565625 0.0001050763 0.0013544268 0.0008223369 -0.0363120922 0.0167024216 0.0014890197 0.0018266826 0.0125361491 0.0154308769 0.0138028639 -0.0031489953 0.0034322151 0.0017420391 -0.0008503337 -0.0000222791 0.0129360376 -0.0084396344 -0.0050079071 -0.0096644188 -0.0102615580 -0.0152950960 0.0445293238 0.0089540392 0.0376777652 0.0524239580 -0.0345421892 -0.0213334533 -0.0009916674 0.0004383648 0.0000707582 0.0726980567 -0.0158326835 0.0226692646 0.0231178789 -0.0469739600 -0.0367888956 -0.0042010388 0.0033114422 0.0183158039 -0.0153964157 -0.0066910170 0.0021660046 -0.0005442138 -0.0006169210 -0.0008248987 -0.0078492066 -0.0063074157 -0.0096133095 0.0090026714 -0.0003403635 -0.0146428597 -0.0452981796 -0.0205538162 0.0325448076 -0.0460218979 -0.0322296685 -0.0393688330 0.0007804734 0.0002735961 0.0003217266 -0.0476917199 -0.0242419655 -0.0008190190 -0.0197150999 -0.0239205146 -0.0573737358 -0.0007860898 0.0004408044 0.0004317957 -0.0010648582 0.0000326133 -0.0003238406 0.0005178283 0.0005403070 0.0005183464 0.0006012952 0.0002771435 0.0001228019 -0.0161622122 -0.0216998637 0.0145952273 0.0317560627 0.0344999254 -0.0238904293 -0.0513226155 0.0583391529 -0.0128162472 0.0900691669 0.1036204233 -0.0557427551 -0.4361911759 0.0910376053 0.0148418388 0.0077040746 0.3014607611 -0.0911504969 -0.0631081907 -0.0416899798 0.0051187816 0.0506993797 -0.1169060537 0.0520012992 -0.3623563412 0.0509649095 0.2215443390 -0.1310181328 -0.4088114525 0.0733936735 -0.0087026738 0.0010171241 -0.0328570170 -0.0039133413 -0.0152154661 0.0100214625 0.0197428034 0.0017920842 0.0254981265 -0.0236214230 -0.0508362622 0.0084788703 0.1196667494 0.0684097362 0.1940014495 0.0182781762 -0.1551444039 0.1085634357 0.0201443987 0.0338213385 0.0043563933 -0.0162168642 0.0325911254 -0.0493652993 0.1354115950 0.0795809388 0.1277599089 0.0104276212 0.1001362038 -0.0548194650 -0.0004724450 0.0006779180 0.0001866466 0.0029516561 0.0008773425 -0.0001623570 -0.0021528947 -0.0027762067 0.0001796385 0.0019345904 -0.0003514834 -0.0009946281 -0.0004866629 0.0005738630 0.0003023826 0.0001170943 0.0001511364 -0.0003201509 0.0008153182 -0.0008846938 -0.0003933392 -0.0011280539 0.0005679433 0.0005234533 -0.0004884252 0.0007846464 -0.0003282886 0.0032600304 -0.0002199593 -0.0008522861 0.0001873717 0.0002426974 -0.0000265540 0.0010078089 -0.0006029201 0.0003564346 0.0003875474 -0.0007299615 0.0001259306 -0.0004432631 0.0002228003 -0.0008202023 -0.0007249024 -0.0003768374 -0.0001957643 -0.0000580015 0.0000294598 0.0002054466 0.0009875724 0.0007016700 -0.0002220860 -0.0005409896 -0.0013375108 -0.0022191571 0.0000761859 0.0001418817 0.0008631518 -0.0009838773 -0.0003489748 0.0001013046 0.0001636011 -0.0004627348 0.0006184108 0.0005815364 0.0005915853 -0.0005660558 -0.0000163739 0.0002651521 -0.0005318189 -0.0017727104 0.0014104710 -0.0115546262 -0.0069821656 0.0020330671 0.0032901398 -0.0034506091 0.0032940786 0.0032627629 -0.0001211820 0.0000049066 0.0000521543 -0.0044830237 -0.0047171391 0.0014024752 0.0047470378 0.0058069022 -0.0019389161 0.0017504140 -0.0024092141 -0.0014165553 0.0015188213 0.0014710562 -0.0016276575 -0.0042870278 -0.0306836925 -0.0083142416 0.0200460140 -0.0003287390 -0.0029983539 -0.0044830819 -0.0133365088 -0.0178698025 -0.0007340705 0.0010714192 -0.0025568556 0.0043118307 -0.0028426275 0.0057804707 -0.0183881953 0.0195061919 -0.0470812751 0.0023267959 -0.0014571113 -0.0016623655 -0.0002995389 0.0034602730 0.0007080961 0.0014918235 0.0002674779 -0.0012093324 -0.0020117463 -0.0027299119 0.0009932367 0.0043428726 0.0044288875 -0.0006183847 -0.0057877629 -0.0029716015 0.0025232732 0.0128088795 -0.0063840716 0.0113864673 -0.0027051276 -0.0132785853 -0.0015480293 0.0118641208 -0.0007337546 -0.0099283969 -0.0089864071 -0.0155839928 -0.0044977178 0.0006990719 0.0049127090 -0.0009659523 -0.0009032607 -0.0003505101 0.0007214163 0.0003278349 0.0030251413 -0.0060790663 -0.0003331395 0.0000647303 0.0011579997 -0.0394160403 -0.0099718078 0.0371790342 -0.0702292868 0.0879459675 0.0751907021 0.0308058548 0.0103997665 -0.0007111327 -0.0063716572 -0.0053795180 -0.0024590460 -0.0000267567 0.0025296938 0.0009463776 0.0012235272 0.0024131596 0.0016518833 -0.0008807749 0.0009526941 0.0003479644 0.0014425391 0.1770591330 0.1035782785 0.0054246349 -0.2039891074 -0.1175503272 -0.0073306141 0.0037575840 -0.0013827721 0.0068717293 -0.0132528021 -0.0014097700 -0.0008510384 -0.0042178345 -0.0040531874 -0.0049185767 -0.0029436003 -0.0082332449 0.0008426183 -0.0028219619 -0.0113927108 -0.0027508489 -0.0060604759 0.0094143282 -0.0016408416 0.0026516231 0.0088750585 0.0007467174 -0.0020028331 0.0005797211 -0.0015889122 0.0055191314 0.0025948771 0.0324423686 -0.1884341262 -0.0961147652 0.0323659462 -0.0825089467 -0.0624611686 0.0206493439 -0.1519056468 -0.1242900849 -0.0008641248 0.0005376724 0.0001508620 0.0001243454 0.0001932173 0.0004632296 0.0001870537 -0.0000041292 -0.0001658181 0.0002597927 -0.0000490179 0.0000356693 0.0003613613 -0.0004143240 -0.0001009913 -0.0004641138 -0.0003223092 -0.0005415904 0.0029569278 0.0003718401 0.0013332838 -0.0006332888 -0.0005245981 0.0010099575 -0.0000730919 0.0001312211 0.0002163844 0.0033921476 0.0002702850 0.0002755313 -0.0002837641 -0.0002792000 -0.0008880939 -0.0027606890 -0.0002167249 0.0032115889 0.0027408919 -0.0000198447 -0.0020601410 -0.0031972296 -0.0016077791 -0.0014575388 -0.0009989766 -0.0002616696 0.0011785797 0.0033529242 0.0006253298 -0.0040640264 -0.0198240473 -0.0118557142 0.0084352606 0.0098234338 0.0177746123 0.0112058326 0.0011895153 0.0007923952 -0.0003978838 -0.0097687189 -0.0030959885 0.0028387485 0.0029586442 -0.0014423171 -0.0056233706 -0.0000186906 -0.0000704611 -0.0000308399 -0.0001024819 -0.0000098868 -0.0000773442 -0.0000594708 0.0006013531 0.0011361101 0.0000191407 -0.0003314823 -0.0002279258 0.0000618315 -0.0003597138 0.0001293559 0.0006976217 0.0001940307 -0.0002960718 -0.0004902303 0.0006437671 -0.0001216662 0.0006874537 0.0006942231 -0.0003801748 -0.0041319770 0.0008549053 -0.0000851820 0.0003248990 0.0016340842 -0.0005966698 -0.0006090205 0.0000064993 0.0000084554 0.0002840193 -0.0009270656 0.0003935296 -0.0035867463 0.0006526066 0.0013623599 -0.0014794542 -0.0036598380 0.0009766183 -0.0002943956 -0.0001662886 -0.0006091233 -0.0001203462 -0.0002888996 0.0001611242 0.0002279843 0.0003913908 0.0001254819 -0.0000931619 -0.0003488434 0.0001917377 0.0015613488 0.0009215870 0.0016118746 0.0004566608 -0.0017169101 0.0015716305 0.0002342834 0.0004900960 -0.0000303863 -0.0001706722 0.0001424767 -0.0003477591 0.0013479236 0.0009872513 0.0012607402 -0.0004212067 -0.0003317642 -0.0003854033 0.0622712834 -0.0345309899 -0.0630569929 -0.2773683574 -0.1647720847 0.0629922281 0.2293063002 0.2681012218 0.0705050730 -0.0181195282 0.1681725923 0.1004437576 -0.0142510159 -0.0868604787 -0.0794719577 -0.1667002957 0.2466630115 0.1567144791 -0.0452476616 0.1504933841 0.1963386134 0.5144042957 -0.1578107445 -0.0961163494 0.0052430741 -0.0059344092 0.0016660341 -0.0305706281 -0.0053380986 0.0058898610 0.0010107491 -0.0075911843 0.0028134087 -0.0035691473 0.0174058572 -0.0089293481 -0.0110312596 0.0102246603 -0.0029919014 -0.0107450101 -0.0109149805 -0.0028979309 -0.0048048667 -0.0185379953 0.0046568736 0.0024627916 0.0067217178 -0.0031484383 0.0046266651 0.0065165159 0.0009820470 -0.0197000819 0.0003398322 -0.0235631214 0.0059380489 -0.0015278964 0.0053793433 0.0065731495 0.0016587778 0.0000832021 -0.0079248748 -0.0005125052 -0.0023384797 0.0096667470 0.0050650458 -0.0079071992 0.0015740171 -0.0035036893 0.0114416991 0.0556358649 -0.0336895753 0.0708113378 -0.0084098184 -0.0131443365 0.0036224467 0.0006389157 -0.0029751142 -0.0014918740 -0.0045580630 0.0001792366 -0.0005599392 0.0081019508 0.0046647995 -0.0032249305 -0.0049274464 -0.0037284429 0.0031130234 0.0031659111 0.0019851590 -0.0026082935 -0.0028213380 -0.0003477895 0.0028463758 0.0068971712 0.0292340275 0.0034809393 -0.0340465979 0.0087017517 0.0118194302 0.0170538264 -0.0137881700 0.0147825609 0.0009615274 -0.0028736918 0.0100864675 -0.0230635518 0.0234095553 -0.0412987818 0.2420505898 -0.2221525932 0.3796754209 -0.0097518745 0.0053582019 0.0210227303 -0.0108506908 -0.0023734214 0.0046024817 0.0036779759 0.0188960753 -0.0056143027 0.0080986078 -0.0069782586 -0.0057085090 0.0066028914 0.0055975686 -0.0018884678 0.0111674921 -0.0058680533 -0.0041594969 0.0000280899 0.0278185997 0.0375242700 0.0128883730 -0.0598799886 -0.0002802940 0.0048300844 0.0071618763 -0.0068039649 0.0067371966 -0.0735854155 -0.0207262271 -0.0638127953 -0.0351751923 0.0238214353 0.0013080790 0.0012329868 -0.0007718983 -0.0004901085 -0.0025592695 -0.0141666299 0.0102022744 0.0081032181 0.0022500729 -0.0282184364 0.0760941966 -0.1195119577 -0.0013962202 0.0126240273 0.0224330998 0.0072083707 -0.0006585749 -0.0041066208 -0.0041452484 0.0004374918 0.0000492629 0.0029393502 -0.0026826603 -0.0001188739 0.0017954965 -0.0006892530 0.0001747708 0.0010646854 -0.0003517224 -0.0001075043 -0.0038010021 0.0194205330 0.0101097795 -0.0062228635 -0.0238909182 -0.0101183509 0.0002038920 -0.0030375921 -0.0011918160 -0.0006685545 0.0022275745 0.0045532798 -0.0075314285 0.0123222525 0.0064195105 -0.0023537469 -0.0020836831 0.0112042622 -0.0012305019 0.0038569998 -0.0136754084 0.0001280486 0.0011735468 -0.0011453670 -0.0011995580 -0.0025358315 -0.0012888302 -0.0009763483 0.0030171901 0.0021199058 -0.0022833652 0.0006211762 -0.0003573365 0.0210683806 -0.0429992694 -0.0280595008 0.0047044244 0.0271473634 0.0114863909 0.0166299081 -0.0218877448 -0.0309291257 0.0104644016 -0.0066271034 0.0021082293 0.0009905509 -0.0024303022 -0.0042194849 -0.0050858146 0.0000466645 -0.0022278762 -0.0012421744 0.0006822098 0.0004344034 -0.0027635555 0.0028054661 0.0019748766 0.0020650791 0.0019014043 0.0021677209 -0.0085800045 -0.0067452677 -0.0037863175 -0.0173947588 0.0106782933 0.0051268639 0.0005304791 -0.0002716333 -0.0000183658 -0.0108290044 0.0030461990 -0.0007084444 -0.0092736458 0.0115840757 0.0103736471 0.0032967610 0.0013069600 0.0029538468 -0.0081216538 -0.0018035459 0.0017326267 0.0027115862 0.0011670150 0.0009341816 -0.0010349082 -0.0011498695 -0.0027237479 -0.0010319576 -0.0015768798 -0.0007845968 0.0106936229 0.0111227402 0.0000469110 -0.0300979347 -0.0295258151 -0.0311163841 -0.0009205563 0.0000348176 0.0002306951 -0.0015579289 -0.0007025499 -0.0029509063 -0.0149672650 -0.0102771826 -0.0194226785 0.0003028466 0.0000366057 0.0000111126 0.0002061332 -0.0000670404 -0.0002007146 0.0002710518 -0.0004853753 -0.0006553439 -0.0001022403 0.0002373945 0.0005980329 0.0028197665 0.0087211665 -0.0041542833 0.0067219377 0.0152411081 -0.0059732423 -0.0009748933 -0.0186183119 0.0075397429 0.0007196026 0.0048195883 -0.0022550070 0.0054256652 -0.0205076012 0.0066033501 -0.0188057268 0.0410935922 -0.0116157568 -0.0002815537 -0.0137894246 0.0044748028 -0.0044677805 0.0063391635 -0.0012596071 -0.0131261235 -0.0103494669 0.0130263767 0.0133324819 0.0314473406 -0.0159993924 0.0011256135 -0.0128029975 0.0116965365 -0.0000409261 -0.0077102682 0.0067499793 0.0026259902 0.0128088236 -0.0059532092 -0.0041452123 -0.0075807989 -0.0005728870 -0.0054394368 0.0088598197 -0.0175880710 0.0026505095 -0.0307395496 0.0277526148 0.0035246726 0.0176311616 -0.0093558053 -0.0009210526 -0.0038827058 0.0023745665 0.0087997683 0.0210970777 -0.0033961881 -0.0180982113 -0.0402389618 0.0024329024 0.0435553419 -0.0583207171 0.0665633471 -0.0612449025 0.1709905670 -0.1117875351 0.1284514555 0.1889606370 -0.1808299389 -0.3863017185 -0.2616948398 -0.0058017154 0.0085793638 -0.0531732013 0.0728803598 0.3483957200 -0.0749471968 -0.1778317093 -0.2911706642 0.1160889795 -0.0435616509 -0.0526998039 0.1179592742 -0.1461803514 0.0407227768 -0.0448665809 0.0135733714 -0.2491526824 -0.0371657194 0.0457778268 0.0047669235 -0.0556164681 0.0205772511 -0.0308513722 0.1181975011 -0.0580749368 -0.0629392221 0.0809408791 -0.0265763919 -0.0696611781 -0.0782308275 -0.0078993069 -0.0349867387 -0.1273154624 0.0258303394 0.0153413654 0.0503936990 -0.0242534106 0.0393302626 0.0476260462 0.0058755809 -0.1518736667 -0.0099752903 -0.1987540061 0.0390791177 -0.0071080500 0.0315846238 0.0433762806 0.0127291315 0.0014571391 -0.0212912094 0.0013476613 -0.0149696158 0.0113228398 0.0050786188 -0.0096835693 0.0031470588 -0.0079855335 0.0288740239 -0.0160139422 0.0104868952 -0.0165300082 0.0118540090 0.0108779715 -0.0032472000 0.0007005751 0.0013096737 -0.0000541786 0.0024275916 0.0002316540 -0.0002677970 -0.0037816699 -0.0001150423 0.0014064920 0.0010396700 -0.0010403782 -0.0011652545 -0.0023322928 0.0005512865 0.0021380455 0.0002395204 -0.0040845812 -0.0018767333 0.0000295247 -0.0046255767 0.0075115034 0.0125729751 -0.0060076598 -0.0078546277 -0.0066833780 0.0170229845 0.0015617222 0.0002754787 0.0008751773 -0.0035913913 0.0056972860 -0.0068055941 0.0119555968 -0.0717763850 0.0645868097 -0.1054546895 0.0037435752 -0.0020876259 -0.0063125930 0.0037531911 0.0011168722 -0.0015486442 -0.0010145642 -0.0064709219 0.0012750145 -0.0032209314 0.0026628642 0.0020168005 -0.0019223831 -0.0020560885 0.0005277947 -0.0042299606 0.0017930262 0.0016916812 0.0024693047 -0.0106092106 -0.0114550333 -0.0042126125 0.0230791079 0.0019001130 0.0005240230 -0.0038569895 0.0007840984 -0.0030103027 0.0232830491 0.0066042902 0.0236517585 0.0133812679 -0.0085413513 0.0034799445 0.0003898028 -0.0018002717 -0.0074537052 -0.0010747670 0.0673057448 0.0701175934 0.0584708668 0.0292183024 0.0096277793 -0.0233650418 0.0386713208 -0.0001298720 -0.0031380557 -0.0065562008 -0.0029323449 -0.0002775497 0.0012789424 0.0018296427 -0.0007658680 -0.0007955947 -0.0020228368 0.0028443534 0.0008133507 -0.0010701298 0.0001282702 0.0011878686 -0.0004137498 0.0003152767 0.0003977037 0.0017299040 -0.0065806454 -0.0036188092 0.0022330534 0.0078649036 0.0032453848 -0.0004795433 0.0003218212 0.0039488954 0.0027254726 -0.0050037342 -0.0039833556 0.0068653724 -0.0137826509 -0.0076486179 0.0027736418 0.0011069158 -0.0129215400 -0.0002680386 0.0007257001 0.0068765641 -0.0011324500 0.0015944439 0.0002795659 0.0007303232 0.0014807432 0.0009017382 0.0000409971 -0.0003285540 0.0000466823 0.0010441597 0.0008042682 0.0009384017 -0.0070042132 0.0138479015 0.0087722337 -0.0016190447 -0.0102456211 -0.0045805639 -0.0054651378 0.0069897454 0.0101378262 0.0794519857 -0.0504847412 0.0126410036 0.0050794943 -0.0125060472 -0.0263625418 -0.0363139308 -0.0010740589 -0.0158331233 0.0009909775 0.0010740108 0.0012509555 -0.0234781600 0.0231513790 0.0177661466 0.0152545531 0.0119622770 0.0130182836 -0.0900049350 -0.0442178741 -0.0307796321 -0.1160134215 0.0747135953 0.0286002303 0.0009983688 -0.0004534624 0.0001799362 -0.1142995791 0.0329859331 -0.0214604599 -0.0603317747 0.0749625621 0.0693714651 -0.0000692465 0.0026325269 0.0229229941 -0.0339459478 -0.0127711270 0.0114705137 -0.0034077793 -0.0014422524 0.0001352718 -0.0170211651 -0.0173451348 -0.0330773406 0.0202654590 -0.0010136609 -0.0214259475 -0.1074935617 -0.0333608714 0.0487859863 -0.0744269375 -0.0426292816 -0.0403330083 0.0022292363 0.0011169925 0.0004797078 -0.1101386913 -0.0559136105 -0.0146011087 -0.0397845099 -0.0334817203 -0.1063614789 0.0016256632 -0.0003557406 -0.0000332779 0.0011217563 -0.0006793731 -0.0006755951 0.0009941739 0.0008353573 0.0008625647 0.0017283073 0.0003854065 0.0000207262 0.0170397476 0.0616751667 -0.0290062453 0.0372227345 0.0999185742 -0.0382878973 -0.0038240966 -0.1251332192 0.0501898077 0.0032466413 0.0317211119 -0.0145648353 0.0557020876 -0.1395168829 0.0419466678 -0.1325507846 0.2831310863 -0.0807053129 -0.0009506370 -0.0931083788 0.0309452003 -0.0278723967 0.0427689102 -0.0094383040 -0.0763393965 -0.0738435960 0.0805801455 0.0973213990 0.2198710751 -0.1088649043 0.0038778626 -0.0877138364 0.0743770684 -0.0021786815 -0.0561567117 0.0464592554 0.0185746808 0.0891769354 -0.0412677196 -0.0271617288 -0.0513164209 -0.0020112660 -0.0322067170 0.0655193643 -0.1130908292 0.0221422345 -0.2154547156 0.1970382990 0.0255906403 0.1217420921 -0.0624898455 -0.0068033245 -0.0268035025 0.0156485238 0.0712900721 0.1494203884 -0.0111355749 -0.1308596706 -0.2874870733 0.0166296592 -0.0141763553 0.0181476488 -0.0210310869 0.0188005732 -0.0547209765 0.0355589381 -0.0412543659 -0.0605400834 0.0576773220 0.1201281348 0.0815698512 0.0015004392 -0.0024025699 0.0170859126 -0.0246733081 -0.1172806043 0.0250005595 0.0600556619 0.0961771653 -0.0379918401 0.0150638497 0.0188636269 -0.0408137729 0.0493765249 0.0210407755 -0.0179229322 0.0060918414 -0.1226903573 0.0024241045 0.0232770046 0.0052336280 -0.0107232296 0.0017206140 -0.0166435625 0.0219754978 -0.0070270364 0.0175385390 0.0313392427 -0.0146618870 -0.0017577462 -0.0277088311 0.0409648738 -0.0151173520 -0.0280132551 -0.0053769305 0.0045704183 0.0135404686 -0.0025694610 0.0202448423 0.0244234890 0.0050138717 -0.0853301283 -0.0206775027 -0.0996963141 -0.0642059110 0.0408998627 -0.0264269461 -0.0423938898 -0.0404877107 -0.0186782049 0.2458373474 -0.0136015245 0.1821411524 -0.2820126926 -0.1451774419 0.2075191989 -0.0965807769 0.1621778987 -0.5149454140 0.0348293682 -0.0344433128 -0.0822090128 -0.1181000558 -0.1098847300 0.0567857237 -0.0158580311 -0.0066409953 0.0049481655 -0.0197802280 -0.0017107620 0.0118598264 0.0258854222 -0.0022115864 -0.0099451817 -0.0015107967 0.0155909592 0.0066653463 0.0261962462 -0.0096294567 -0.0208969642 0.0013254449 0.0360765455 0.0125152537 -0.0019452825 0.0254687799 -0.0555206214 -0.0758291152 0.0478479772 0.0642641855 0.0299587437 -0.1489154173 -0.0741932382 -0.0052841843 -0.0009309211 0.0043007181 0.0100194825 -0.0008385847 0.0058893592 0.0120469252 0.0038913482 -0.0904505241 -0.0170007780 -0.0015529132 0.0037847461 -0.0204008346 -0.0127712671 0.0068474924 -0.0025830154 0.0308102450 0.0067141791 0.0255711465 -0.0175452383 -0.0109596073 0.0060826587 0.0180285477 -0.0009346493 0.0226364773 -0.0038203399 -0.0102391297 -0.0908182888 0.0888605638 0.0445814742 0.0149002999 -0.1316338391 -0.0484671989 -0.0366019426 0.0495975902 0.0277840904 0.0223878406 -0.0676117606 -0.0191689800 -0.1570448969 -0.0962970790 0.0521317006 -0.0222426433 -0.0049990194 0.0063001771 0.0931028592 -0.0062018581 -0.2868595698 0.0330688507 0.0204639756 0.0056889314 -0.0056065692 0.0020997185 -0.0156891783 0.0021284332 -0.0073049471 -0.0023645583 0.0032711878 0.0032227049 -0.0000999841 0.0002916412 0.0031730018 0.0029348496 0.0056228102 -0.0113657055 -0.0063022805 -0.0021162224 -0.0028710253 -0.0021021449 -0.0010867703 -0.0006947272 -0.0018210568 -0.0040625515 0.0074889079 0.0052881650 -0.0010677575 -0.0065931530 -0.0030218724 -0.0116025297 0.0069582093 -0.0254352791 -0.0210116555 0.0356552694 0.0192008305 -0.0157264729 0.0408198011 0.0230775002 0.0280025928 0.0211708743 0.0242677784 -0.0064136161 0.0035127935 -0.0124711407 0.0066766516 -0.0086885903 -0.0010749133 0.0001008441 0.0005510060 0.0004312249 0.0023602197 -0.0067485877 -0.0067146077 0.0003871254 -0.0060442258 -0.0040017414 0.0012944347 -0.0039806008 0.0000336442 0.0014829785 0.0059411089 0.0038346809 -0.0005340133 -0.0005154739 -0.0024445572 0.0291649231 -0.0147007986 -0.0029999803 -0.0093470234 -0.0156895066 0.0119751724 -0.0131087213 0.0055689414 -0.0127456228 -0.0017229783 0.0012571910 -0.0016650998 -0.0087545222 0.0112113383 0.0127376059 0.0069276024 0.0046509655 -0.0002444140 0.0085018759 0.1192716610 -0.1369816532 -0.0006012750 -0.0584020262 0.0030612903 0.0002055635 -0.0003691830 -0.0017493698 -0.0230419159 0.0195601405 0.0010195871 -0.0306186488 0.0206521343 0.0339159070 0.0016491833 0.0031090213 0.0037344063 -0.0228899223 -0.0067640308 0.0085702018 0.0216240421 0.0096538928 0.0043407483 -0.0026186020 -0.0009080244 -0.0104997799 -0.0058205009 -0.0052611343 0.0028686001 -0.0090630660 -0.0200149403 0.0148764785 -0.0719691826 -0.0660770280 -0.0645578796 -0.0054091475 -0.0046711613 -0.0011395563 0.0167228825 -0.0187326180 -0.0060325842 -0.0773309944 -0.0471707587 -0.0917374516 0.0001506159 -0.0027156399 -0.0035372701 0.0029934190 0.0015855854 0.0045466816 0.0003055265 0.0003206396 -0.0014767671 -0.0019874490 0.0012199834 0.0013660917 0.0047216675 0.0177007871 -0.0080615952 0.0016886148 0.0195893282 -0.0073847531 -0.0004735373 -0.0275713815 0.0104309075 0.0011565500 0.0097259601 -0.0040710036 0.0104575788 -0.0301405911 0.0124167800 -0.0434236063 0.0918164411 -0.0276946793 -0.0027394797 -0.0218507464 0.0085418170 -0.0008535252 0.0060342425 -0.0021382639 -0.0088402747 -0.0211380702 0.0127417394 0.0230713909 0.0401768352 -0.0173397541 -0.0048167051 -0.0197020772 0.0083013409 -0.0020305691 -0.0178847521 0.0108667534 0.0043655583 0.0221587811 -0.0111563187 -0.0031349906 -0.0084979021 0.0025479550 0.0023238590 0.0242950832 -0.0099526843 0.0101511117 -0.0449114353 0.0430200604 0.0074079600 0.0291426311 -0.0121066269 -0.0022426912 -0.0085427577 0.0044141751 0.0269012566 0.0379030627 0.0053815530 -0.0457212257 -0.0973186833 0.0057845017 0.0048141789 -0.0032107296 0.0081078577 0.0048033160 0.0260665700 -0.0146252489 0.0102871585 0.0164464754 -0.0228289919 -0.0218854961 -0.0202990215 0.0005750954 0.0024691681 -0.0033563040 0.0122965301 0.0534331579 -0.0116384592 -0.0260459394 -0.0295001422 0.0015250559 -0.0174058607 -0.0179832509 0.0257588895 -0.0226720537 -0.0005806885 0.0005874771 -0.0001118452 0.0035432082 -0.0000771462 -0.0006707669 -0.0001557566 0.0003093965 -0.0000230541 0.0005384388 -0.0005592069 0.0001400668 -0.0007549427 -0.0009540786 0.0004162388 -0.0001392449 0.0009701174 -0.0016927654 0.0004741312 0.0007736263 0.0002209350 -0.0001702733 -0.0003181460 0.0000477143 -0.0005263559 -0.0008906784 -0.0002350300 0.0029803889 0.0004834616 0.0027989617 0.0024480502 -0.0014754303 0.0010811887 0.0016496367 0.0016468376 0.0007341414 -0.0090830247 0.0004491688 -0.0071284871 0.0107256964 0.0056183790 -0.0080639800 0.0035765862 -0.0065445707 0.0207925710 0.0518995228 -0.0339426042 -0.0877009982 0.0178149599 0.0115791553 -0.0062423523 0.0018912124 -0.0017564827 -0.0019613083 0.0039051383 -0.0095178095 -0.0068316104 -0.0077726855 0.0027507442 0.0060380676 0.0021682387 0.0021185619 -0.0008838096 -0.0017120202 0.0047359413 0.0033424535 0.0027355528 -0.0050070823 -0.0037159475 -0.0087723909 0.0161650600 0.0112394594 0.0062802709 0.0003142000 -0.0023925040 -0.0044083093 0.0498383447 0.0165661427 0.0115420226 0.0031688274 -0.0082782313 -0.0066807776 0.0063272047 0.0159419111 -0.0088009697 0.0133785170 -0.0621790100 -0.0515156171 -0.0088680671 0.0200402461 -0.0714486330 -0.0342614774 0.0253355158 -0.0092456606 0.1057599842 0.0174651707 0.0777241890 -0.0603191410 -0.0381597662 0.0339620839 0.0600721579 -0.0074130751 0.0677740742 -0.0224435580 -0.0310911991 -0.3048332836 0.3033388986 0.1764754493 0.0585720943 -0.3910757333 -0.1228140868 -0.0510562618 0.1276324126 0.0499979614 0.0622588366 -0.3054823399 -0.0741211213 -0.5274177601 -0.3131945592 0.1793626902 0.0018684568 0.0008587389 0.0009555165 -0.0036711316 0.0121651535 -0.0163802270 -0.0013475458 -0.0006418353 0.0003282200 0.0046070758 -0.0113614487 0.0181895515 0.0011133552 0.0012548338 -0.0008719436 -0.0014254439 -0.0005673384 0.0000169315 -0.0002287298 -0.0005548730 0.0002699679 -0.0001205759 0.0011057085 -0.0000209293 0.0002116242 0.0004710911 -0.0007801508 0.0002202321 0.0003858657 0.0000835595 0.0009971338 -0.0038063240 -0.0020581796 0.0006722783 0.0036643656 0.0012988931 -0.0000182704 -0.0008634373 0.0015492551 0.0017363559 -0.0033960902 -0.0002512995 0.0000473976 -0.0016912570 -0.0019597838 -0.0028146955 -0.0012438244 0.0027746522 0.0015504854 -0.0029341261 0.0016511885 -0.0007842361 0.0018957449 -0.0016533264 -0.0003048675 -0.0002399021 -0.0002671653 0.0000276402 0.0005181491 0.0012523504 0.0002946814 -0.0012392039 -0.0005590628 -0.0002992142 0.0055217540 0.0031708625 0.0001300121 -0.0055190157 0.0010288712 -0.0027256711 0.0021251912 0.0043134737 -0.0008639760 0.0001573382 0.0001523756 0.0001098269 0.0025225937 0.0013176505 0.0005581961 0.0002085893 0.0007503813 0.0053346098 -0.0019470360 -0.0003691135 -0.0005309449 -0.0005583878 -0.0003983285 -0.0009288047 -0.0012482585 -0.0019653849 0.0015968395 -0.0035326878 0.0091253862 -0.0081993245 0.0079946640 0.0067239872 -0.0016036326 0.0007426396 -0.0009415195 -0.0143323600 0.0012503251 -0.0075825004 0.0041701175 -0.0065079413 -0.0051204898 -0.0007489573 -0.0004980550 -0.0003939916 0.0016361735 0.0004322015 -0.0003236593 -0.0013311345 -0.0005539696 -0.0001982925 -0.0003598133 -0.0004513076 -0.0002712511 0.0011801154 0.0006500281 -0.0004225634 -0.0055686903 -0.0021572139 0.0003867926 0.0072909313 0.0074154846 0.0081910246 0.0003928541 0.0001526633 -0.0000118914 -0.0063730943 -0.0017847664 0.0006540276 0.0063717037 0.0040485970 0.0063130882 -0.0001607483 0.0002297827 0.0009164371 0.0000355222 -0.0003629431 0.0002146598 -0.0000445255 0.0001349936 0.0002102582 0.0001515393 -0.0000913821 -0.0001885503 -0.0001067661 -0.0005258446 0.0002057995 0.0000034376 -0.0005284339 0.0002080488 -0.0000458291 0.0008097711 -0.0002826039 -0.0000230630 -0.0002826624 0.0001159177 -0.0007265778 0.0008891043 -0.0003734843 0.0013958001 -0.0028692671 0.0008880095 0.0000764556 0.0006151325 -0.0002707350 -0.0000015385 -0.0001803638 0.0000845037 0.0003409264 0.0006829378 -0.0001482002 -0.0007516702 -0.0012803716 0.0004462556 0.0001917538 0.0004535355 -0.0000711234 0.0000967715 0.0005008319 -0.0002261885 -0.0001046635 -0.0005359922 0.0002719061 0.0000322122 0.0001282962 -0.0000757492 -0.0003041202 -0.0007322370 -0.0001181678 -0.0002602008 0.0008043938 -0.0007616862 -0.0001890293 -0.0006820453 0.0002518160 0.0000584588 0.0002537104 -0.0001405675 -0.0007535576 -0.0009229404 -0.0002276172 0.0012770479 0.0027553907 -0.0001784166 -0.0070396465 0.0068492939 -0.0092367493 0.0062255472 -0.0250919926 0.0158592075 -0.0162482223 -0.0221087407 0.0225431651 0.0624213249 0.0356427720 -0.0006235954 -0.0006694672 0.0068070682 -0.0099429337 -0.0468350631 0.0087562874 0.0237238383 0.0377234879 -0.0138185254 0.0061997882 0.0056705078 -0.0162255115 0.0201032143 -0.0003988728 -0.0038394651 -0.0152778222 -0.0187321959 -0.0105690548 -0.0222337988 -0.0029330598 -0.0003230687 0.0056258678 -0.0002593377 -0.0019925462 0.0008750507 0.0008870420 -0.0007369778 0.0028482452 0.0008606135 0.0005834276 0.0006337449 0.0003376428 0.0010748692 -0.0002947286 -0.0002867933 -0.0006901132 0.0001624076 -0.0001986675 -0.0000702402 -0.0000335276 0.0004910802 -0.0001283022 0.0014596261 -0.0002072375 -0.0000915396 -0.0004095290 0.0000130181 0.0002412290 -0.0008286055 0.0002769094 0.0002417484 0.0005890444 -0.0007130777 -0.0006165776 0.0008067399 -0.0006109413 0.0007722557 -0.0030738247 0.0003673108 0.0011975929 0.0006103793 0.0106316750 0.0089676025 -0.0033218219 0.0009235745 0.0006139645 -0.0004103088 0.0025316613 -0.0001820828 -0.0014390077 -0.0041274496 -0.0013711724 0.0020925909 0.0014066955 0.0003611566 -0.0009300107 -0.0030702703 0.0001753838 0.0021328348 0.0025348013 0.0005495348 -0.0024002059 -0.0042515094 -0.0034688908 0.0018340019 0.0113494217 -0.0038545798 -0.0069123860 -0.0035657003 0.0059425086 0.0040894349 -0.0000877657 0.0013382459 0.0002992259 -0.0008039301 -0.0006446082 0.0010592342 -0.0025176745 0.0008087091 -0.0011403096 -0.0008023698 0.0002801523 0.0001637886 -0.0007943777 -0.0003934235 0.0003732916 -0.0002154397 0.0007864018 0.0002566277 0.0010891894 -0.0001337080 -0.0002937085 0.0001331842 0.0000258716 -0.0003440302 0.0009471049 -0.0001519228 -0.0004208789 -0.0030593036 0.0026418024 0.0013633267 0.0004810426 0.0005719156 -0.0015249097 0.0028869143 -0.0012735384 0.0011200127 0.0010065147 -0.0022130354 -0.0005557614 -0.0059944406 -0.0033785411 0.0015077014 -0.0000506066 -0.0024917406 -0.0012719690 0.0018622340 0.0122196878 0.0363106864 -0.0001141565 -0.0003369250 -0.0004577285 0.0000957943 -0.0003165761 0.0003151657 -0.0001928626 -0.0005871304 -0.0002717112 -0.0001063735 0.0000620436 0.0000195726 0.0003188553 0.0002938823 0.0000260948 -0.0001869431 -0.0000901321 -0.0000913068 -0.0003609503 -0.0003956189 0.0004081418 -0.0001864895 -0.0000776826 -0.0000015578 -0.0000364264 -0.0000651728 -0.0000204584 0.0001856130 0.0002037748 0.0000052686 0.0005742934 -0.0002994221 0.0002458482 -0.0004766875 0.0006153737 0.0000538777 0.0007746652 -0.0004226259 0.0000874652 0.0000872644 -0.0002025583 -0.0015147217 -0.0006608285 -0.0005321394 -0.0011353339 0.0027642220 0.0021788739 -0.0025854273 -0.0002524014 -0.0003238158 -0.0005662227 0.0003357497 -0.0010091223 -0.0002869558 0.0009102698 0.0003323888 0.0003782108 -0.0006149609 0.0007792965 0.0005216238 0.0000004879 -0.0008645580 -0.0003135643 -0.0004809661 0.0000819867 0.0006407054 0.0122182574 0.0229642588 0.0328040403 0.0460193382 -0.0467728506 -0.0257606118 -0.0575244448 0.0024804813 -0.0330139609 -0.0163965963 0.0139250735 0.0150274212 0.0539465853 -0.0314290824 -0.0180258445 -0.0627837610 0.0181133924 -0.0041103620 0.3162091717 -0.0573008943 0.0667382607 -0.3174626396 0.2156443110 0.1334421259 0.0063115578 -0.0001140738 0.0026836891 0.6132224573 -0.0933884259 0.2437069249 -0.3595909448 0.3236995488 0.1573604597 0.0003289953 0.0001944276 0.0000450772 -0.0003536433 -0.0001420953 0.0000004121 0.0005265223 0.0002245551 0.0000173288 0.0003293934 0.0003615947 0.0004943535 -0.0006949211 -0.0002595895 0.0003461813 0.0036555707 0.0014992642 -0.0006368350 -0.0026006646 -0.0024570626 -0.0032903224 -0.0001289422 -0.0001312251 -0.0000394995 0.0036031643 0.0014245314 -0.0000946032 -0.0020821864 -0.0013242056 -0.0013810800 -0.0005222812 -0.0051018588 -0.0091542379 0.0008689576 0.0004477057 0.0014332132 -0.0000377473 0.0000262795 -0.0000073849 -0.0000575861 0.0000234862 0.0000174004 -0.0012953040 0.0006475070 -0.0000942393 0.0000636076 -0.0007961001 -0.0000291183 -0.0003137421 0.0009158849 -0.0000458854 0.0010503644 -0.0007786415 0.0000017831 -0.0011782215 0.0005835924 -0.0012151903 0.0040018288 -0.0057960406 0.0021042627 0.0000705258 0.0000763409 0.0001565999 0.0000933319 0.0003397165 -0.0001249791 0.0020863903 -0.0004741717 -0.0010040724 -0.0002659596 -0.0002364264 -0.0003230623 -0.0002282882 0.0014065782 -0.0013972754 -0.0001688103 0.0007276883 -0.0009215702 -0.0000940767 -0.0013086441 0.0008202740 0.0003103953 0.0006145692 0.0000038740 0.0016058780 -0.0004326544 0.0032852590 -0.0004755145 0.0032394471 -0.0032081804 -0.0003323621 -0.0017378465 0.0009219691 0.0001157544 0.0005227383 -0.0003039957 -0.0008346668 -0.0020430757 0.0004281284 0.0024350521 0.0053039051 -0.0003740471 -0.0002312008 0.0003863315 -0.0000763594 0.0010001427 -0.0000811174 0.0002511673 -0.0009176200 -0.0011547812 0.0003552870 0.0015820677 0.0005338994 -0.0002926135 0.0001891361 0.0004367593 -0.0002058959 -0.0016970598 -0.0004091530 0.0008099884 0.0014490889 -0.0010970371 -0.0007030518 -0.0013065852 -0.0001660980 0.0009655898 -0.0000042705 0.0001158477 0.0000327200 0.0004541104 0.0010310669 -0.0000142582 -0.0003143679 0.0008916502 -0.0003835553 0.0002514585 -0.0011317817 0.0007794200 0.0019543258 -0.0005594566 0.0000247931 0.0005508202 0.0023299136 0.0000107802 -0.0010694797 0.0017430314 -0.0021851597 -0.0052814394 0.0054355495 -0.0030615222 0.0109777665 -0.0059570653 -0.0022983476 -0.0059322303 -0.0239313777 -0.0522835656 -0.0012048415 -0.0002312355 0.0001407490 -0.0019461075 -0.0010830834 -0.0003799711 0.0058106570 0.0001659117 0.0035519700 -0.0070410904 -0.0037023253 0.0052251124 -0.0015951627 0.0031662353 -0.0116944875 -0.0151904038 0.0208537259 0.0356017674 0.1213073503 0.0871565634 -0.0266361311 0.0128874425 0.0050882201 -0.0079530251 0.0206164101 -0.0011266228 -0.0149361248 -0.0279563944 -0.0141398495 0.0127796833 0.0093974381 0.0009955488 -0.0058933538 -0.0277596773 0.0032010494 0.0191118967 0.0158242442 0.0017380661 -0.0088997329 -0.0300987815 -0.0798924342 -0.0143724113 0.0803069670 -0.0288122644 -0.0597530196 -0.0287681318 0.0756123788 0.0506523997 0.0014852563 0.0067601266 0.0014460535 -0.0067747719 -0.0011543193 0.0009477834 -0.0054379812 -0.0053516376 0.0413761689 -0.0023406317 0.0037902902 0.0018027671 -0.0003284183 0.0024111146 0.0005200843 0.0009164952 -0.0011694656 -0.0006749093 -0.0005601004 0.0004025859 0.0002385208 0.0011515953 -0.0018739192 -0.0007846715 -0.0000356894 -0.0014464072 -0.0001664757 0.0103832665 -0.0069837583 -0.0048824813 -0.0003257054 0.0043180647 0.0016209031 0.0095938041 -0.0074512621 -0.0052661673 -0.0005594825 -0.0103864723 -0.0014821929 0.0041677520 0.0052847367 -0.0008350358 -0.0066907540 -0.0073943190 0.0006740264 -0.0039807800 0.0113717321 0.0228231776 -0.0129302747 0.0032881323 0.0372644464 0.0001123075 0.0051484838 -0.0062487625 0.0001150343 -0.0000575459 0.0007597012 -0.0005512484 -0.0006154261 -0.0003668831 -0.0000206039 0.0001339249 0.0000781458 -0.0000218148 -0.0003152227 -0.0001058502 0.0000387866 -0.0000802954 -0.0002844932 0.0000836222 -0.0000718709 -0.0000361357 0.0002453706 -0.0009840110 -0.0008535666 0.0000113331 0.0009313916 0.0005354905 0.0015985302 0.0017013561 -0.0014076160 0.0000757496 -0.0007653804 0.0001911781 0.0003375305 0.0022157329 0.0020570983 0.0006102305 0.0005866861 0.0022951759 -0.0001158486 0.0004373094 -0.0000473717 0.0002044697 -0.0006661391 0.0001631519 -0.0000511229 -0.0002167277 -0.0001290998 -0.0000931667 0.0002383544 0.0002154923 -0.0001208668 0.0000702829 -0.0000232631 -0.0000803447 0.0005159822 0.0000390535 -0.0001703399 0.0000952773 0.0000581500 0.0000453267 0.0004938995 0.0004256608 -0.0002819784 0.0003205560 -0.0003251439 -0.0003586155 -0.0002806714 0.0003583818 0.0002930969 0.0001171024 -0.0001532560 -0.0009542654 0.0002995695 0.0000305610 -0.0000493525 0.0001781510 0.0001559982 0.0003519333 0.0000157421 0.0001804889 -0.0000750341 0.0025781272 -0.0028593525 0.0033463978 -0.0046241296 -0.0012286497 0.0002123623 -0.0001234152 -0.0000103461 0.0010489431 0.0000242628 0.0007749609 0.0011613599 -0.0008775909 -0.0002108051 -0.0403988545 -0.0313413207 -0.0373984014 0.0555965163 0.0250987092 -0.0075752702 -0.0095251035 0.0008680231 0.0148754586 -0.0346749290 -0.0358398909 -0.0421538904 0.0573887430 0.0335538253 -0.0063083369 -0.3980327626 -0.1710110216 0.0320359465 0.3065784946 0.2425992920 0.3430521530 -0.0022177771 0.0037862670 0.0016718628 -0.4826866519 -0.1968909212 0.0493750939 0.2722177522 0.1876147468 0.2698510359 -0.0000028428 -0.0001351917 -0.0002573922 0.0001269030 0.0001540015 0.0002306079 0.0011383963 -0.0012969384 -0.0026049186 0.0038230417 -0.0015174394 -0.0039014830 -0.0004129916 -0.0010206609 0.0004939387 -0.0002801428 -0.0017134768 0.0006141421 -0.0001428577 0.0019211827 -0.0007499664 0.0001503013 -0.0005991700 0.0002289402 -0.0024660168 0.0023316316 -0.0002384071 0.0030424719 -0.0059272397 0.0017799651 0.0001573442 0.0015976133 -0.0004556425 0.0003049326 -0.0005680521 0.0000982300 0.0019157718 0.0009939416 -0.0020361489 -0.0022289962 -0.0040769543 0.0024523533 0.0001765549 -0.0001854206 -0.0003277729 -0.0002020212 -0.0018607851 0.0008427649 -0.0000821097 0.0012065981 -0.0008882758 0.0001546877 -0.0007939328 0.0008594133 0.0011075427 0.0017836129 0.0003963371 0.0011468315 -0.0035015140 0.0040166067 -0.0006038786 0.0007957547 -0.0009203079 0.0009674205 0.0009213554 0.0005545126 -0.0009759999 -0.0009986848 -0.0047584546 0.0010376402 0.0028464872 0.0009650519 0.0009548168 -0.0026298184 0.0028943704 -0.0031020384 0.0057727543 -0.0037303861 0.0031013689 0.0050829656 -0.0073443522 -0.0181405734 -0.0136830477 -0.0018337240 0.0011389471 -0.0018312898 0.0057007683 0.0245964018 -0.0121502596 -0.0149665420 -0.0170496531 0.0054641809 -0.0052601559 -0.0154542127 0.0117664331 -0.0091493781 0.0003537724 -0.0002281732 0.0007248293 -0.0021055189 0.0002631813 0.0016887658 0.0002770383 -0.0004972975 -0.0001251007 -0.0003500841 0.0005709455 -0.0002745690 0.0007374846 0.0014366342 -0.0006248802 0.0002508903 -0.0014402917 0.0016177010 0.0001000424 -0.0008691188 0.0005146414 0.0018154471 -0.0017401290 0.0011123661 -0.0033834952 0.0026003737 0.0010093004 -0.0001260620 0.0076285582 0.0158367814 -0.0020608811 0.0016504912 -0.0014488920 -0.0014667084 -0.0017608732 -0.0010414728 0.0080554918 0.0009202861 0.0044037041 -0.0114632830 -0.0065518951 0.0092676261 -0.0007765668 0.0038425019 -0.0180737902 -0.0665454046 0.0884445845 0.1334446986 0.4193234944 0.3319755581 -0.1318084356 0.0495261851 0.0188248060 -0.0249679702 0.0837336967 -0.0058801480 -0.0601631191 -0.1129246677 -0.0526593072 0.0498670222 0.0385650897 0.0041250534 -0.0266536664 -0.1083576354 0.0113199011 0.0744115011 0.0624886490 0.0053457182 -0.0366636559 -0.1095518993 -0.2959648093 -0.0282326907 0.3507047777 -0.1277637802 -0.2419421653 -0.1161102471 0.3118717842 0.1981648885 0.0067265748 0.0286231949 0.0038424333 -0.0247367554 -0.0071352614 0.0098546976 -0.0496434922 0.0045348196 0.1177232663 -0.0094148185 0.0124670128 0.0052166020 -0.0027660209 0.0084857781 0.0024446974 0.0027878679 -0.0026279000 -0.0015833138 -0.0001500288 0.0002135126 0.0000741965 0.0057218368 -0.0051378806 -0.0032273029 0.0004893217 -0.0059660519 -0.0009452068 0.0286615251 -0.0185675032 -0.0148633870 -0.0001493598 0.0123871619 0.0026027445 0.0362328302 -0.0249753079 -0.0192019406 -0.0016629739 -0.0451679627 -0.0067124431 0.0034001295 0.0127635102 0.0010211634 -0.0250672180 -0.0297305040 0.0025058908 -0.0214734268 0.0498753704 0.0998816254 0.0051831151 -0.0005201340 -0.0126641243 0.0010808652 0.0024310105 -0.0032584414 0.0000104873 -0.0006655967 0.0004692011 -0.0003365001 -0.0003839122 -0.0000793107 0.0000925191 0.0006782705 -0.0000924755 0.0003699992 -0.0007717125 -0.0001409984 -0.0000624083 -0.0004366543 -0.0009520270 -0.0000450645 -0.0003587076 0.0002376210 -0.0002265484 0.0009315322 0.0004762376 0.0002291390 -0.0007368122 -0.0006253358 -0.0009111916 -0.0004598844 -0.0007161497 -0.0013499765 0.0026209210 0.0011253854 -0.0001611726 0.0006654935 0.0006416908 0.0011462087 0.0011877948 0.0071773529 0.0000881397 0.0009034992 0.0041497111 -0.0002306287 -0.0018311271 0.0004552609 0.0002335945 -0.0003975319 -0.0010218114 -0.0000241158 -0.0001904380 -0.0010511040 -0.0001661818 0.0011533177 0.0007993827 -0.0007973854 0.0003883475 0.0004681717 0.0001615930 -0.0010958922 -0.0006815564 -0.0006675292 -0.0004294420 0.0002329417 0.0004497122 -0.0012927680 -0.0012112821 -0.0021054639 0.0014021804 0.0013058411 0.0020954679 0.0002208684 0.0005229394 -0.0005568274 -0.0001137495 -0.0004116401 -0.0026632425 0.0018567878 0.0012084131 0.0032171435 -0.0008127264 0.0002519523 -0.0126942038 0.0048011027 -0.0061095257 0.0133686171 -0.0146682213 -0.0043868432 0.0000357121 -0.0001852030 -0.0000059842 -0.0249653029 0.0043204065 -0.0090646453 0.0154878749 -0.0137420275 -0.0061695278 0.0153856211 0.0104198877 0.0098376249 -0.0207489332 -0.0089081550 0.0022756270 0.0098210705 0.0032001226 -0.0029716739 0.0124407342 0.0115117384 0.0147701266 -0.0225934002 -0.0117256559 0.0051925495 0.1484727714 0.0628899435 -0.0164438057 -0.1182323025 -0.0972062142 -0.1355443464 -0.0015088225 -0.0021538423 -0.0004179964 0.1483356095 0.0697949247 -0.0156503786 -0.0945222952 -0.0657130336 -0.0875918746 0.0000304714 0.0000189946 -0.0000176343 0.0000591442 0.0002041897 0.0001695837 -0.0007999538 0.0002134031 -0.0000601355 -0.0015468182 0.0007443952 0.0012043780 -0.0000231578 0.0005323942 -0.0001900167 -0.0001655170 0.0005706594 -0.0001587335 0.0001913702 -0.0008162720 0.0002502407 -0.0000880165 0.0003615587 -0.0001228010 0.0018404819 -0.0009681426 0.0002440418 -0.0018462437 0.0035834664 -0.0010750428 -0.0000087128 -0.0006084484 0.0001630514 -0.0000741546 0.0001074857 -0.0000111634 0.0004283319 -0.0005099843 0.0005249729 0.0004121644 0.0008120634 -0.0003827990 -0.0001493554 -0.0000103242 0.0000578506 0.0000385990 0.0003879150 -0.0002533065 0.0000424154 -0.0002926309 0.0002112713 -0.0000155599 0.0003358626 -0.0002716423 -0.0000192080 -0.0001751382 0.0004926331 -0.0004034378 0.0015867835 -0.0018333089 0.0002355998 -0.0001079199 0.0002682059 -0.0003246697 -0.0004358814 -0.0000804611 0.0004792106 0.0004960260 0.0014955806 -0.0009900327 -0.0022879913 -0.0001680402 0.0009072203 0.0000383661 0.0014805404 0.0021210888 0.0033511890 -0.0014050200 0.0000846717 0.0006347665 -0.0036389094 -0.0157563746 -0.0135454682 -0.0055220755 0.0002294461 -0.0011562495 0.0007766631 -0.0021071065 0.0003107524 0.0028336923 -0.0056247923 0.0009745550 -0.0029750774 0.0015426757 0.0030989992 -0.0046317424 0.0011941971 -0.0032357821 0.0052069428 0.0073394487 0.0020159129 0.0060572130 0.0041334604 -0.0011447143 -0.0018788855 -0.0028621145 0.0005551905 -0.0003026819 -0.0020137009 -0.0021529930 0.0009418515 0.0000572282 -0.0004888080 0.0005242285 0.0000028234 -0.0002021423 -0.0000421668 -0.0000997764 0.0001828453 -0.0003771256 0.0000529096 0.0000837656 0.0001193186 -0.0010876536 -0.0000719707 -0.0012502861 0.0007150568 -0.0005350660 0.0000386021 0.0038950616 0.0019845940 0.0000255720 -0.0029581206 -0.0006311674 -0.0003083359 0.0039858628 0.0021159176 -0.0031412399 0.0003011238 -0.0006784664 0.0040361511 -0.0025075050 0.0017854709 0.0054843401 -0.0023286518 -0.0018356463 0.0005610597 0.0000187025 0.0000001476 0.0000628832 -0.0004656453 -0.0006856785 -0.0004100141 0.0013041027 0.0004754465 -0.0009726735 -0.0000769236 -0.0003063717 -0.0000565907 0.0007283122 0.0004519508 -0.0003451688 -0.0019352019 -0.0021705758 0.0021565504 0.0025388530 -0.0050842173 -0.0014149579 0.0005470005 -0.0005377324 -0.0007198241 0.0008561351 0.0090371080 0.0030785771 0.0012079688 -0.0012278455 -0.0016275679 0.0007708683 0.0013346761 0.0002205854 -0.0036424571 0.0050999709 0.0003753594 -0.0000299387 -0.0013440197 0.0001334344 -0.0026782956 -0.0030738591 0.0010874473 -0.0017777106 0.0038893896 0.0013108366 0.0014187399 -0.0001967304 -0.0015748710 0.0015675578 0.0000533607 -0.0010657831 0.0020853403 -0.0002895112 -0.0009260179 -0.0200271244 0.0156370863 0.0110469795 0.0060443952 0.0157226564 0.0092350637 0.0239541919 -0.0131886880 -0.0069702064 0.0022242798 -0.0039339528 -0.0014248859 -0.0298401276 -0.0191236708 0.0082843916 -0.0000831621 0.0031635931 0.0014260471 -0.0043829559 -0.0182753774 -0.0317447797 0.0004772110 0.0003813331 0.0000602607 0.0002003189 -0.0004756839 0.0017010747 -0.0006860028 0.0005007443 0.0003960497 -0.0003095558 -0.0000721760 -0.0000807363 0.0004634018 -0.0003900312 0.0000516748 -0.0003139754 0.0004649541 0.0000020402 -0.0004868955 -0.0000522347 0.0003663186 -0.0002498212 0.0002909671 -0.0000416727 0.0003411096 -0.0005247706 -0.0002940229 0.0003098021 0.0005440928 -0.0000713200 -0.0005724376 -0.0001073631 0.0005947897 -0.0000961642 0.0000589489 -0.0002323147 0.0006914755 -0.0014661484 -0.0010271649 0.0041172103 0.0025302502 -0.0058545339 -0.0009236218 0.0008832863 -0.0005654592 0.0011541243 0.0003455246 -0.0004154262 0.0001907368 0.0007285565 0.0003894783 0.0001715217 -0.0005110614 0.0002687983 0.0011138311 -0.0010978031 -0.0003269477 -0.0007100507 0.0014972994 0.0009278014 0.0000577961 -0.0023001358 -0.0005616851 -0.0003945181 -0.0015333936 0.0005546347 -0.0113849046 -0.0000661574 -0.0130558388 -0.0050142538 -0.0629849396 -0.0673332847 0.0063507628 -0.0186018100 -0.0235737918 -0.2644709854 0.0870465000 0.0174016878 -0.0051420707 0.0401480807 0.0256696029 0.0763535098 0.0326977014 0.0834415873 -0.1330060065 -0.0494087016 -0.1369164767 0.4899034669 -0.4706560381 -0.3386046221 0.0567938065 -0.0170780881 -0.0065764201 0.4210346125 -0.0063444239 0.2467831513 0.1172933239 0.0187219393 0.0625980685 0.0002782179 0.0000856130 0.0000257067 -0.0003998750 -0.0001706856 -0.0000112555 0.0003960842 0.0002209116 0.0001306148 0.0000409989 0.0000078841 0.0000235467 -0.0002354190 -0.0001557453 0.0000924587 0.0007867560 0.0004929914 -0.0001189783 -0.0019742904 -0.0016971839 -0.0022738380 -0.0001268157 -0.0000201212 -0.0000209123 -0.0001549884 0.0003493905 -0.0000583035 -0.0012061824 -0.0004976685 -0.0010725159 0.0043942709 -0.0413773830 -0.0639752716 0.0389000052 0.0300576984 0.0605201960 -0.0000010157 -0.0000399749 -0.0000353956 -0.0000174673 0.0000003511 0.0000312313 0.0024690559 0.0042176841 -0.0015825393 -0.0044034504 0.0040650491 -0.0007581907 0.0027041746 -0.0065692327 0.0019188463 -0.0025179909 0.0033597311 -0.0009384886 0.0277399282 -0.0088676117 -0.0001828958 -0.0225361950 0.0405633536 -0.0117958260 -0.0019459641 -0.0062377361 0.0024614621 0.0012462148 0.0010918195 -0.0005921382 -0.0081737068 -0.0052462895 0.0058531371 0.0137517868 0.0185513150 -0.0095931037 0.0001411923 0.0000018956 0.0000803115 -0.0000911273 -0.0000474401 -0.0000290268 0.0000761419 -0.0000212948 -0.0001195826 -0.0000430509 -0.0000485791 0.0000173545 -0.0012523681 0.0000182842 -0.0004810773 0.0002302228 -0.0005080188 0.0003832067 0.0000055623 0.0000371898 -0.0000432770 0.0000615186 0.0000265901 0.0000905107 0.0000415908 0.0000174899 -0.0000878501 0.0002396528 0.0003324029 0.0000581069 -0.0004418074 0.0004295420 -0.0007478022 -0.0001348637 -0.0021692771 0.0012838362 -0.0011160732 -0.0017233520 0.0018596469 0.0040480649 0.0026369495 0.0001247680 0.0000682032 0.0002699035 -0.0013084880 -0.0049741495 0.0012319175 0.0026956184 0.0031482213 -0.0004996488 0.0013091230 0.0024551675 -0.0025722117 0.0019454720 0.0008450842 -0.0002346554 0.0000749939 -0.0045362237 0.0023282218 -0.0002688314 -0.0013323556 0.0019338141 -0.0006446524 0.0005708984 0.0006836094 -0.0004067459 0.0008156910 0.0002724793 -0.0001275608 -0.0002533643 0.0030617915 -0.0011741640 -0.0002932762 0.0022421769 -0.0029048939 0.0037009312 0.0022337925 0.0013724550 -0.0005654384 0.0007642221 -0.0019524988 0.0043243933 0.0046474096 0.0056790060 0.0003518643 -0.0003443579 0.0017154030 -0.0015192433 -0.0007627753 -0.0001473053 0.0030375171 -0.0002642632 0.0021244178 -0.0034631949 -0.0015414926 0.0021813478 -0.0016418784 0.0019662897 -0.0058623710 -0.0037412183 0.0059913932 0.0091372686 -0.0395166553 -0.0265865130 0.0029109430 -0.0015516273 -0.0022753021 0.0010209345 0.0057122625 -0.0012650927 -0.0042884842 -0.0057067866 0.0005398858 0.0033306610 0.0053252512 -0.0004872169 -0.0033304360 -0.0039299699 0.0015073782 0.0027808314 0.0022490938 -0.0004591148 -0.0017461990 -0.0052087761 0.0270429125 0.0164579558 0.0549065764 -0.0201710576 -0.0476207403 -0.0043054720 0.0361793489 0.0169724329 0.0004305714 0.0025329243 0.0006946757 -0.0017598059 -0.0007397649 0.0001899682 -0.0011253309 -0.0019898097 0.0088605575 -0.0011906032 0.0015559779 0.0007370582 -0.0001432267 0.0004611369 0.0001350669 0.0002830225 -0.0001080788 -0.0001110879 0.0000163397 0.0001969220 -0.0000157574 0.0001624518 -0.0007111082 -0.0001781766 0.0004304764 -0.0002555557 -0.0002339461 0.0035324649 -0.0020891455 -0.0019343443 0.0000766453 0.0002108908 0.0003156332 0.0016567729 -0.0017318241 -0.0009876429 0.0003762922 -0.0027134395 -0.0004852495 0.0004606578 0.0008321092 -0.0000232240 -0.0007180761 -0.0012973090 0.0002046506 -0.0013680293 0.0029812546 0.0004484046 -0.0050639007 -0.0068483861 -0.0032023595 0.0007103027 0.0033061052 -0.0034185438 -0.0003940013 -0.0005639047 0.0003085362 -0.0005483498 -0.0003994427 -0.0002970238 0.0003929317 0.0000632050 0.0001309008 0.0004682419 -0.0011602084 0.0001340069 -0.0002595155 0.0000426674 -0.0000759666 -0.0001664001 0.0000643821 -0.0001466435 0.0001917281 -0.0011828985 -0.0008167415 0.0004370015 0.0012455504 0.0004068210 -0.0014257371 0.0038335826 -0.0040113201 -0.0020207446 0.0047573456 0.0000770662 -0.0027813809 0.0043822377 0.0027627156 0.0010826626 0.0009196002 -0.0003290494 -0.0001573124 -0.0001350951 0.0003084099 0.0004766588 -0.0003608544 -0.0000006596 0.0001290065 0.0005107360 0.0007334782 0.0001351884 -0.0004881266 -0.0001912976 0.0002323039 -0.0002197997 -0.0001692199 -0.0011454901 0.0020731320 0.0011164767 -0.0001587485 -0.0021879959 -0.0008175324 -0.0008838562 0.0006153811 0.0015747253 0.0018299617 -0.0009003464 -0.0001400810 0.0000613979 -0.0005474660 -0.0003365766 -0.0007487329 -0.0001250043 -0.0005288675 -0.0009014236 0.0003346561 0.0000420813 -0.0003279206 0.0006825478 0.0005959063 0.0004764887 0.0002722166 0.0004692627 -0.0026156418 0.0007805684 -0.0029350104 0.0007484262 -0.0015913861 -0.0016111416 0.0001387416 -0.0000945824 -0.0000512615 0.0009757759 0.0005784994 0.0013438465 -0.0022312938 0.0030226318 0.0022450136 -0.0117350686 0.0253058532 0.0889270281 -0.0114621546 -0.0032812974 0.0345693459 -0.2040803829 -0.1107826430 -0.0749785694 0.0157391870 0.0001656824 -0.0312925176 0.0545678054 0.0058352917 -0.0716869830 -0.0991145159 -0.0317693873 0.1226628119 0.2787550743 0.2977113916 0.4779072998 0.0422179771 0.0225465292 0.0168011907 0.5969244616 0.2228895119 -0.1715745674 -0.0107880929 -0.0446245653 -0.1702405302 0.0000246589 -0.0002336385 -0.0003740046 0.0002506905 0.0001731183 0.0003690427 -0.0141463841 0.0298689708 0.0604710854 0.0495258847 -0.0118613429 -0.0481259052 -0.0016009843 -0.0027736161 0.0012810223 0.0007019023 -0.0033889785 0.0013968178 -0.0015653543 0.0045451535 -0.0014948948 0.0011370241 -0.0021373211 0.0006909225 -0.0177761436 0.0062574431 0.0004413089 0.0139070675 -0.0260902242 0.0073718351 0.0016685580 0.0040239840 -0.0015576314 -0.0002420453 -0.0010796981 0.0003619562 0.0102342482 0.0025051720 -0.0053700432 -0.0084622599 -0.0125219720 0.0067851174 -0.0033761860 -0.0052018236 -0.0010373666 -0.0002021057 -0.0041427910 0.0046932918 -0.0004403389 0.0063244961 -0.0054839116 0.0003317641 -0.0014761316 0.0017252999 -0.0072737065 0.0025700024 -0.0167800094 0.0055993035 -0.0194425816 0.0242134696 0.0040994842 0.0081230054 -0.0006733852 -0.0026899576 -0.0043210272 -0.0004219953 0.0264482081 0.0189516880 0.0270474734 -0.0273104601 -0.0545572526 0.0008275318 -0.0001276903 -0.0014278615 0.0015992312 -0.0013770394 0.0020383943 -0.0011162622 0.0008635291 0.0021232750 -0.0031679701 -0.0082857409 -0.0073766048 -0.0013518263 0.0011860544 -0.0005675118 0.0040490958 0.0174439181 -0.0111127858 -0.0116125349 -0.0099197580 0.0039665186 -0.0024265491 -0.0155540413 0.0088246374 -0.0058290691 0.0142147844 -0.0004286858 0.0001165495 -0.0914486286 0.0329329186 -0.0003311892 -0.0248611831 0.0251866443 -0.0077549307 0.0054125029 0.0235002079 -0.0120176166 0.0006218698 0.0095714077 -0.0023415453 0.0033878448 0.0120426879 -0.0065912223 -0.0012042233 0.0229711421 -0.0228758840 0.0195910240 0.0246098513 0.0043929487 -0.0086677429 -0.0060311974 -0.0084792785 0.0534962420 0.0376745258 0.0383406409 0.0083567390 -0.0043953958 0.0097488873 -0.0097998147 -0.0063895425 0.0004683341 -0.0005633931 0.0018079250 0.0003196177 -0.0000570522 0.0002942863 0.0004676003 -0.0004450875 0.0004162015 0.0002443085 -0.0002102207 -0.0000801433 -0.0003917907 0.0022302346 0.0022733358 -0.0011280082 0.0001985317 0.0001915935 0.0000134525 -0.0003314538 0.0000448190 0.0002198516 0.0004612546 0.0000023994 -0.0003166271 -0.0004397274 -0.0000100312 0.0002221966 0.0002872308 -0.0001160269 -0.0002060938 -0.0003446139 -0.0001677689 0.0002388438 0.0006657699 -0.0024914742 -0.0010791888 -0.0036016803 0.0012324798 0.0033748735 0.0002731212 -0.0017493226 -0.0009642574 0.0000998350 -0.0002106802 -0.0000961939 0.0000315164 0.0001334467 -0.0001289790 0.0002234991 -0.0000350783 0.0002309472 0.0000965389 -0.0000732939 0.0000000444 -0.0000352208 -0.0000670537 0.0000124186 -0.0000717544 0.0000369332 0.0000089782 0.0000372357 0.0000105326 0.0000227603 0.0000018937 -0.0000072999 -0.0000381555 0.0000108525 0.0000249488 0.0000058712 -0.0003777266 0.0002415392 0.0002851570 -0.0001072033 0.0004403198 -0.0002691917 0.0005499186 -0.0003200060 -0.0000350396 0.0000054761 0.0003123783 -0.0000010175 -0.0006193139 -0.0003930045 0.0001093250 0.0001903653 0.0003295602 0.0000848995 -0.0004372446 -0.0019950883 -0.0017822221 -0.0342266598 -0.0221769910 -0.0117918414 0.0000415947 -0.0001516195 0.0001659416 0.0001162957 0.0001335920 0.0000025810 0.0000054167 -0.0000362347 0.0000015473 -0.0000511286 0.0000208103 -0.0000458087 -0.0001232043 0.0001561185 -0.0000087196 -0.0000237630 -0.0002039252 0.0001853975 0.0000387227 0.0000111018 0.0000339973 0.0000000305 0.0000117742 0.0000329186 -0.0000663641 -0.0000078172 -0.0000190852 0.0008438292 -0.0005490515 0.0007292408 0.0004410645 -0.0009134930 -0.0003149582 0.0004723994 -0.0006150652 -0.0003047129 0.0013706750 0.0006692146 -0.0010944531 -0.0003734498 0.0005659347 -0.0002224406 -0.0000016590 0.0004272271 -0.0003211894 -0.0001501446 -0.0002345106 -0.0002633760 0.0000629373 -0.0000540159 0.0000330732 -0.0000211750 0.0000456290 0.0000324052 0.0001761638 -0.0000341301 0.0000026922 0.0000286904 0.0002453182 0.0001988737 0.0001112750 -0.0001843497 -0.0001793767 0.0358600190 -0.0192849323 0.0008394217 0.0033276524 -0.0060917065 -0.0072494281 -0.0139542865 -0.0016391328 -0.0084552272 -0.0101778445 0.0038894396 0.0010331611 -0.0089676481 0.0120579141 0.0093664237 0.0095657785 0.0021653713 0.0059922881 -0.0384347240 -0.0068544720 -0.0237629731 -0.0198389528 0.0022057536 -0.0065546170 0.0024007870 -0.0008067763 -0.0002417839 -0.0286419911 0.0138274817 0.0029859644 -0.0204364686 0.0335106138 0.0264744015 -0.0004522222 -0.0039130385 -0.0125318369 0.0144102322 0.0047142203 -0.0092007652 0.0131861366 0.0072143580 0.0047512689 0.0048295610 0.0067399430 0.0164454393 -0.0097236981 -0.0016899266 0.0076546590 0.0611854135 0.0264251887 -0.0304426775 0.0097207350 -0.0035765809 -0.0201713505 -0.0030626602 -0.0016064809 -0.0012228985 -0.0069171753 0.0042448965 0.0205052476 0.0221316788 0.0244514614 0.0546961877 0.0007769080 -0.0019245468 -0.0027579212 0.0021081846 0.0010623542 0.0024192746 0.0005860921 -0.0022490204 -0.0042101011 -0.0037662106 0.0006185371 0.0031536339 -0.0197585716 -0.0419147967 0.0190439847 0.0244642919 -0.0418057497 0.0144480129 -0.0314461929 0.0635155804 -0.0192653309 0.0223507116 -0.0362310679 0.0110285702 -0.3454072108 0.0954329255 0.0191100489 0.2457917580 -0.4542343295 0.1303455047 0.0263476873 0.0583455276 -0.0238565194 -0.0055646064 -0.0111036102 0.0042835964 0.1279704532 0.0418242737 -0.0688733857 -0.1144742524 -0.1623444388 0.0873152187 -0.0212556510 -0.0418036308 0.0027558438 0.0079324786 -0.0291034976 0.0390204809 -0.0073072975 0.0476868499 -0.0464474254 0.0022062130 -0.0144218075 0.0143168364 -0.0859282763 0.0024889431 -0.1750940202 0.0462244437 -0.1707907875 0.2123674799 0.0306726432 0.0645540939 -0.0055380559 -0.0199633722 -0.0321433449 -0.0026490472 0.2074602353 0.1432727768 0.2003165492 -0.2108454726 -0.4233169687 0.0067323973 -0.0000245679 0.0000245177 -0.0000747810 -0.0000243453 -0.0002199082 0.0001123048 0.0000194206 0.0000503245 0.0001144974 0.0003194065 0.0002627353 0.0000264621 -0.0000737322 0.0000919024 -0.0002159569 -0.0010639927 0.0002668331 0.0005663016 0.0003452363 0.0000945997 0.0002701242 0.0005040492 -0.0006155109 0.0006338090 -0.0155522461 -0.0106886197 0.0044262944 0.1597753584 -0.0164430220 -0.0099835314 0.0220442093 -0.0043050280 -0.0008546785 0.0176781039 -0.0257535486 0.0076209042 0.0082715561 -0.0123845789 0.0043929936 0.0108843728 0.0106908605 0.0021727638 0.0175656780 0.0318745194 0.0082618542 0.0199755889 0.0109853177 0.0158701163 -0.0077659431 0.0067455760 -0.0193908934 0.1119193104 0.0536627192 0.1200519115 -0.0043939901 -0.0019481416 -0.0029278942 -0.0021535496 0.0023679002 -0.0008661146 -0.0001625110 -0.0000452602 -0.0002100684 0.0008460057 0.0003430230 -0.0004607618 0.0004447433 -0.0004911597 0.0008510041 0.0003777052 -0.0004680940 -0.0004418652 0.0043447304 0.0039316400 -0.0017358669 0.0003951515 0.0002970132 -0.0001063773 -0.0001985307 0.0000867822 0.0001911789 0.0001617672 -0.0001619365 -0.0001849975 -0.0004806139 0.0000980306 0.0003297371 0.0000739125 -0.0001381088 -0.0001042269 0.0000046738 0.0001510342 0.0000024912 0.0003097205 -0.0033040048 -0.0012732341 -0.0048709372 0.0018689942 0.0037105710 0.0001327370 -0.0032097701 -0.0012795343 -0.0001268251 -0.0001145880 0.0000326932 0.0001388637 -0.0000109130 0.0000205298 0.0002162628 -0.0000188826 -0.0007914831 -0.0000232930 0.0000504744 -0.0000072480 0.0000485339 0.0000244098 -0.0000221247 0.0000178690 -0.0000155479 0.0000061869 -0.0000238412 -0.0000293495 -0.0000180352 -0.0000514156 0.0000206314 0.0000501128 0.0000076946 0.0000043267 -0.0000042063 0.0001815936 -0.0001275632 -0.0001642567 0.0000526985 -0.0005865684 0.0001041918 -0.0006258131 0.0003564644 0.0001229103 -0.0000015790 -0.0000181532 -0.0000203155 0.0004314417 0.0002471476 -0.0001204423 -0.0001153003 -0.0001368619 -0.0000636229 0.0003254048 0.0006048280 0.0010774280 -0.0275063885 -0.0233821356 -0.0114931309 -0.0001112757 -0.0000317481 -0.0001799355 0.0000293010 -0.0001623366 -0.0000877258 0.0000747173 0.0000694543 0.0000211389 -0.0000183110 0.0000358833 0.0000336579 0.0000118521 -0.0000772342 0.0000088723 0.0001008563 0.0001078446 -0.0002252603 -0.0000051388 -0.0000267070 -0.0000013963 -0.0000564874 0.0000872093 0.0000861983 -0.0000392821 -0.0000572912 -0.0000548216 0.0001958064 0.0000429892 -0.0000905031 -0.0000069990 0.0000813249 -0.0001097009 -0.0002299398 0.0004342883 0.0002726452 -0.0009827909 -0.0005247062 0.0011256734 0.0003473628 -0.0004183305 0.0005159423 -0.0003733051 -0.0004861707 0.0004007960 0.0000347985 -0.0000015675 -0.0000428335 -0.0000087465 -0.0000036547 -0.0001116217 -0.0000208255 0.0000102836 0.0000099669 0.0000598341 0.0000656529 0.0001162382 0.0000400040 0.0001348571 0.0001475812 0.0000186700 -0.0001489510 -0.0000926981 -0.0285179200 0.0182941128 -0.0049646671 -0.0029959743 0.0037734858 0.0066320430 0.0114619143 0.0012073147 0.0069072087 0.0068872955 -0.0029993995 -0.0011680456 0.0079178662 -0.0096070085 -0.0072431839 -0.0085263327 -0.0009097989 -0.0025057447 0.0354493743 0.0087490538 0.0169079970 0.0208267247 -0.0047269830 0.0017927179 -0.0015764641 0.0005554192 0.0001742709 0.0311777247 -0.0112725894 0.0009087395 0.0123816177 -0.0174216851 -0.0191915754 -0.0031106925 -0.0023876345 -0.0063676660 0.0121921664 0.0039829376 -0.0066336637 0.0027209031 0.0013892240 0.0004033458 0.0036450316 0.0050223776 0.0128339901 -0.0055382301 0.0011669258 0.0045779789 0.0381033657 0.0168592587 -0.0180530761 0.0227732038 0.0103101693 0.0055816122 -0.0008797654 -0.0003953710 -0.0003117169 0.0061530229 0.0073077092 0.0131902693 0.0334726841 0.0255666399 0.0581567847 -0.0007163294 0.0013981794 0.0019480101 -0.0014708568 -0.0006915391 -0.0016054023 0.0000055964 -0.0005484501 -0.0009074595 -0.0011665177 -0.0000007855 0.0006283844 -0.0180421981 0.0196034919 -0.0042603875 -0.0404144958 -0.0050989439 0.0087532241 0.0348146317 -0.0161888476 0.0000520396 -0.0249457879 0.0285274102 -0.0071182371 0.3960972139 -0.0479019924 -0.0445275536 -0.1983661206 0.3528843458 -0.1025093366 -0.0000135700 -0.0173521855 0.0063728112 -0.0060997661 -0.0075748319 0.0031393289 0.0830365507 -0.0300620511 -0.0115945106 -0.0455064580 -0.0641467414 0.0386892228 -0.0250708408 -0.0033417829 -0.0375268980 -0.0180396084 -0.0257371801 -0.0025751200 0.0046172942 0.0176325222 -0.0066331611 -0.0054919991 0.0093169433 -0.0139691786 0.0861892535 0.0600985000 0.1022807527 -0.0252435467 0.0974901548 -0.1293879416 0.0288787928 0.0261541809 0.0227189075 -0.0262178205 -0.0387192710 -0.0086084963 0.2969152974 0.1437350735 0.3455565536 -0.2403224632 -0.4730077706 0.0047383620 0.0000492239 -0.0000033590 0.0000865773 0.0001557595 0.0002655116 -0.0001239502 0.0001474382 0.0002860216 -0.0002880769 -0.0001040103 -0.0001962746 -0.0000411992 0.0000137608 0.0000602034 0.0001282550 0.0003863381 -0.0005363842 -0.0003631565 -0.0004022536 0.0001713173 -0.0002080311 -0.0004194103 0.0001151971 0.0001249142 0.0005047172 0.0004760065 -0.0002291838 -0.0059204523 0.0002769305 0.0003281211 -0.0006023126 -0.0001199197 0.0001458189 -0.0009454327 0.0006633660 -0.0003649712 -0.0005338307 0.0003111781 -0.0000302994 -0.0002919452 -0.0016529253 0.0012039872 0.0007946462 -0.0009065335 0.0013577590 0.0000787230 0.0001290409 -0.0002354904 -0.0000387768 0.0005459484 -0.0000788772 -0.0002934525 0.0008537817 0.0006300994 -0.0001834568 0.0001446426 -0.0006562062 0.0006372396 0.0003646679 0.0001033630 -0.0011749531 -0.0001311489 -0.0006821015 0.0009371837 0.0003694970 -0.0002716221 0.0014758516 0.0000740016 0.0009018697 0.0060710379 -0.0224443899 -0.0249504103 0.4691461157 0.3829549715 -0.1359840534 0.0406161147 0.0305783894 -0.0162462503 -0.0152126186 0.0076785943 0.0133724806 0.0142185772 -0.0180331667 -0.0164657043 -0.0432740878 0.0076341978 0.0320572029 0.0002361256 -0.0117845405 -0.0055970268 -0.0013710592 0.0057335629 0.0041968778 0.0290363258 -0.3449961123 -0.1307002605 -0.4738517278 0.1829840172 0.3348665052 0.0091888163 -0.2846071020 -0.1040630045 -0.0040952969 -0.0133355657 -0.0018291177 0.0089494355 0.0037227514 -0.0004970961 0.0096675730 0.0060643068 -0.0368397744 0.0010020929 0.0017609371 -0.0006712101 -0.0002001829 -0.0005972420 -0.0000250447 -0.0008818909 0.0008317317 0.0008023581 0.0000842776 -0.0023271811 -0.0001652026 -0.0015202735 0.0006763380 0.0007916760 0.0009074306 0.0005047872 -0.0003398342 -0.0040135716 0.0027236683 0.0004591517 -0.0011894083 -0.0220685583 -0.0049636798 -0.0090448327 0.0055993426 0.0048284091 0.0013223368 0.0072504267 0.0006564594 -0.0050264086 -0.0035711705 0.0013897023 -0.0022255620 -0.0009742812 -0.0014125331 0.0037877861 -0.0259324482 0.0224203401 0.0014169826 0.0008474561 0.0003146906 -0.0015933877 -0.0003667105 -0.0012816553 0.0002195505 -0.0025491689 -0.0016137335 0.0007653123 0.0010678493 0.0003012909 0.0005160881 0.0000985404 -0.0000929480 -0.0003450390 -0.0000381024 0.0000762227 -0.0002936380 -0.0001495357 0.0000124374 -0.0003673813 -0.0000300440 0.0001226572 -0.0009454613 0.0011346244 0.0008915538 0.0002728895 -0.0008567596 -0.0003599215 0.0001185151 0.0003597016 0.0000331203 -0.0006080663 0.0011838280 -0.0006263050 0.0007237051 -0.0009846574 -0.0001987069 0.0001610803 -0.0000482173 -0.0016658277 0.0001706383 -0.0004887536 0.0030641389 -0.0006145602 0.0007870995 -0.0004664487 0.0002673818 0.0004927313 0.0000303642 0.0003110673 -0.0011083239 -0.0012021911 0.0004464113 0.0001598960 0.0003532611 -0.0011114085 0.0003594844 0.0007074553 0.0000452359 -0.0003915914 -0.0006034239 -0.0011919965 0.0020464809 0.0011446739 0.0006870019 -0.0004187959 0.0002863688 -0.0000111760 -0.0001074761 -0.0003277944 -0.0002724732 -0.0002065053 -0.0003522450 -0.0001032595 0.0000396293 0.0000360708 0.0000212317 0.0002157677 0.0002639770 -0.0000162452 0.0001649288 0.0001181771 -0.0028598468 -0.0003381370 -0.0010951458 0.0005091453 -0.0010032676 -0.0008298357 -0.0000385551 0.0000798104 -0.0000661117 0.0023397217 0.0001248442 0.0012520666 -0.0020270163 0.0021167401 0.0013666950 0.0016892771 0.0027091625 0.0056356932 -0.0034953648 -0.0014460160 0.0021475527 -0.0132582650 -0.0071785613 -0.0053015941 0.0010637535 -0.0007227217 -0.0024685200 0.0029055203 0.0005509851 -0.0032825630 0.0104606622 0.0051628413 0.0048411091 0.0067394600 0.0100875292 0.0187824555 0.0035503111 -0.0001428504 -0.0010387475 0.0283034294 0.0161625668 -0.0115146387 0.0015204970 -0.0005176655 -0.0058995410 0.0000051353 -0.0001697720 -0.0001926097 0.0001384339 0.0000663451 0.0002436736 -0.0010146813 0.0029142496 0.0059133094 0.0031007797 -0.0007319758 -0.0030720573 0.0010365004 -0.0003298864 -0.0000344366 0.0009674226 0.0006923922 -0.0004716545 -0.0010645436 -0.0000122867 0.0001972204 0.0008013433 -0.0008362202 0.0001904559 -0.0131114752 0.0009901212 0.0016810979 0.0058916153 -0.0103487659 0.0030239296 -0.0004735932 -0.0000610175 0.0000421011 0.0005942263 0.0004691957 -0.0002313487 -0.0058465980 0.0007165116 0.0014806294 0.0048599134 0.0064716077 -0.0036767555 0.0003036463 0.0008157538 -0.0001511050 -0.0011251583 -0.0004081945 -0.0012834298 0.0007211356 -0.0007168179 0.0015696488 -0.0006721166 0.0005574679 -0.0014157900 0.0069898189 0.0026677787 0.0108497960 -0.0033589478 0.0106189913 -0.0142815492 -0.0001238393 -0.0007748599 0.0003912285 -0.0001030088 -0.0002732433 0.0000224989 0.0020020216 0.0002058239 0.0032782557 -0.0008338481 -0.0017284187 0.0001017348 0.0001436245 -0.0002188257 0.0005365764 0.0005758471 0.0023428911 -0.0013653347 0.0007069738 0.0012895042 -0.0018251375 0.0025397440 0.0022382842 0.0018483403 0.0007176852 0.0006843377 0.0009111276 0.0041558996 -0.0022417598 -0.0026494183 -0.0000305021 -0.0014889516 -0.0022067140 -0.0037682354 -0.0001002863 0.0021621372 0.0100040852 0.0120952884 -0.0050051621 -0.1268592669 0.0087683869 0.0086902835 -0.0124179202 -0.0013095049 0.0022022874 -0.0254762435 0.0119300787 -0.0097168850 -0.0139750796 0.0023579995 0.0019459717 -0.0093531890 -0.0343599210 0.0220518510 0.0283231595 -0.0164344115 0.0413926527 0.0056950859 0.0043843137 0.0016759161 0.0022219027 0.0130745791 -0.0071538309 0.0274656471 0.0232488471 0.0360894514 -0.0131255719 0.0057828168 -0.0192465232 0.0116507042 0.0019358357 -0.0020665058 -0.0008063077 0.0000889026 -0.0000906069 0.0016085929 -0.0002149450 -0.0018177179 0.0015489834 -0.0019525142 0.0024739672 -0.0004655812 0.0009043910 0.0008267687 -0.0171701491 -0.0146341319 0.0056339347 -0.0014682729 -0.0011542479 0.0004930479 0.0005728228 -0.0002777762 -0.0005245544 -0.0005130612 0.0005234767 0.0006527233 0.0016900597 -0.0002918015 -0.0012017523 -0.0000519951 0.0005248844 0.0002497176 -0.0000135833 -0.0001545886 -0.0000755834 -0.0014923747 0.0126886398 0.0041025303 0.0181115465 -0.0069513255 -0.0133611432 -0.0003510659 0.0115089899 0.0043419237 0.0000584073 0.0004869398 0.0001256153 -0.0001583464 -0.0001589664 0.0000641696 -0.0006145840 0.0001612360 0.0007299185 -0.0000232847 -0.0000802807 -0.0000287158 -0.0000771782 -0.0000265125 0.0000315816 0.0000421958 -0.0000420276 -0.0000152732 0.0000355536 0.0000551572 0.0000024570 0.0000783814 -0.0000239603 -0.0000532452 -0.0000311136 0.0000570872 0.0000211076 0.0001846430 -0.0001440248 -0.0001268252 0.0000385065 0.0007613998 0.0000695054 0.0007083427 -0.0004007023 -0.0001891322 0.0000002864 0.0005764709 0.0001202512 -0.0006331756 -0.0003758484 0.0002593954 -0.0002088346 0.0000838611 0.0001923276 0.0001391625 0.0007566455 -0.0043999035 0.0292797441 0.0188630259 0.0097681927 -0.0001024390 -0.0000722969 -0.0001357399 -0.0000012887 -0.0001299853 -0.0000408473 0.0000365756 0.0000647798 -0.0000026600 0.0000410829 0.0000175463 0.0000386567 0.0000989211 -0.0001760112 0.0000346404 -0.0001646024 -0.0000667580 0.0001295794 -0.0000228803 -0.0000190988 -0.0000371808 -0.0000407027 0.0001187934 0.0000088720 -0.0000094657 -0.0001534054 0.0000850754 -0.0005167174 0.0003970328 -0.0006426552 -0.0003356272 0.0007404422 0.0002108324 -0.0004693106 0.0007633537 0.0004667209 0.0007820779 0.0005593379 -0.0002716434 -0.0003285054 0.0003845648 -0.0006304062 0.0006100037 0.0002313970 -0.0003594514 0.0000964913 0.0001400994 0.0001723453 -0.0000145080 -0.0000110307 -0.0001007916 -0.0000466108 -0.0001616982 -0.0001070976 0.0000083023 -0.0005635050 -0.0004353135 -0.0000702728 0.0004029847 -0.0001020881 0.0000608449 0.0005517826 0.0000257087 0.0098184025 -0.0077713228 0.0043800520 0.0012019403 -0.0011684579 -0.0033426833 -0.0043225545 -0.0003278250 -0.0026221169 -0.0032832297 0.0015693804 0.0007796236 -0.0032549199 0.0034421973 0.0023789996 0.0039989469 0.0000459733 -0.0000150457 -0.0144855816 -0.0050480304 -0.0056437469 -0.0086178370 0.0016087735 0.0002214413 0.0006874100 -0.0002556288 -0.0001064901 -0.0140800305 0.0039162280 -0.0012985041 0.0000163743 -0.0008509745 0.0052500148 0.0017088057 0.0021621222 0.0052530272 -0.0119007632 -0.0040292724 0.0057610001 -0.0016192490 -0.0009101170 -0.0005532811 -0.0048200131 -0.0057448168 -0.0119532183 0.0056328691 0.0022758010 -0.0021094703 -0.0490508169 -0.0178023604 0.0180038093 -0.0222843079 -0.0129241625 -0.0071072788 0.0006423955 0.0004337878 0.0003267706 -0.0276696461 -0.0159242205 -0.0076496726 -0.0129576252 -0.0168148103 -0.0309745509 0.0003515071 -0.0006584078 -0.0009101331 0.0006201900 0.0003154844 0.0007169060 0.0002440604 0.0004086009 0.0005442123 0.0007172686 0.0000609196 -0.0002612191 0.0284201639 -0.0083341895 -0.0009053670 0.0201725636 0.0194628712 -0.0117662079 -0.0245827715 -0.0023985878 0.0050897067 0.0195286686 -0.0205931186 0.0046380675 -0.3242131530 0.0231436861 0.0437672836 0.1433045183 -0.2513236510 0.0743338468 -0.0152141180 -0.0049072221 0.0017665882 0.0182934184 0.0123653441 -0.0065340978 -0.1675798959 0.0192318857 0.0485251595 0.1464342609 0.1929293823 -0.1082417128 0.0078229033 0.0246807593 -0.0068918029 -0.0310426463 -0.0155838816 -0.0324570717 0.0218849964 -0.0187688331 0.0448385904 -0.0221577658 0.0186134497 -0.0469308669 0.2303916454 0.0945150617 0.3529337929 -0.1134135474 0.3602434803 -0.4826509279 0.0014449162 -0.0165355444 0.0143942018 -0.0104494582 -0.0179774078 -0.0028919303 0.1240299731 0.0387260168 0.1709220152 -0.0948542450 -0.1860612323 0.0038440495 0.0000808953 0.0000540569 0.0000656246 0.0002911513 0.0003250680 -0.0001509034 0.0000559119 0.0000635462 -0.0001409410 -0.0002053960 -0.0002613822 -0.0001068646 -0.0000663768 -0.0000457212 0.0001418734 0.0006424522 0.0000025593 -0.0003599668 -0.0001399113 -0.0002035445 -0.0002491118 0.0001648273 0.0003358041 -0.0003747655 -0.0002546299 0.0010041531 -0.0004665098 -0.0001811078 0.0007672928 -0.0009737564 0.0003926967 0.0007318353 -0.0000962687 -0.0041423543 -0.0036138042 0.0019800419 0.0007266881 -0.0059422286 0.0023238979 0.0018338850 0.0036649583 -0.0008233365 -0.0003960755 0.0027871520 -0.0025688453 0.0001951321 -0.0004807535 0.0007473143 -0.0003633701 -0.0002678461 -0.0005313587 0.0040482610 0.0006993046 0.0044965238 0.0004203480 -0.0005135369 0.0005955013 0.0020326747 0.0014271211 -0.0002681191 0.0002721197 0.0000410382 0.0000753068 -0.0005855928 -0.0003629448 0.0003792825 -0.0002152060 0.0001959597 -0.0007167142 0.0027157098 0.0005805470 0.0008489650 -0.0002073431 0.0003455962 0.0001813115 -0.0002545673 0.0002771514 0.0002670358 -0.0007358479 0.0016465869 0.0011680934 0.0005988871 -0.0000731869 -0.0004376862 -0.0002004937 -0.0007366488 -0.0001339714 -0.0000217793 -0.0000507014 -0.0000712882 -0.0005455277 -0.0004888751 0.0002486255 0.0007971908 -0.0013531623 -0.0006859945 0.0005471399 -0.0011062923 -0.0007391046 0.0002700607 -0.0044161298 -0.0012897970 0.0014519940 0.0014144508 -0.0009801599 -0.0000573388 -0.0037627295 -0.0004688716 -0.0052983989 -0.0001311565 0.0071704220 -0.0025835054 -0.0012899994 0.0003229940 0.0456066198 0.0196782557 -0.0180317714 -0.0240080563 0.0137019875 0.0112924607 0.0020817179 0.0055695423 0.0004065981 -0.0246089707 0.0180480515 0.0147652048 0.0046365215 -0.0543362432 -0.0086057088 -0.2652998160 0.1672837997 0.1381901841 0.0017264439 -0.0326037095 -0.0052840866 -0.2599409447 0.1692045555 0.1212702044 -0.0187382677 -0.5944163237 -0.0833080331 0.5044030280 0.2975376352 -0.1654957842 0.0002140339 0.0003536125 -0.0000381153 0.0000144120 -0.0004745229 0.0012405362 -0.0032950089 -0.0025989297 -0.0013099734 0.0004589303 -0.0023309359 0.0002295372 0.0026558325 -0.0013783712 -0.0010280342 -0.0000532863 0.0004762126 -0.0001428652 -0.0002250333 -0.0000530529 0.0000750468 0.0000745626 0.0000868183 -0.0000932295 0.0000454147 0.0000001099 -0.0000553685 0.0000280920 0.0000934093 0.0000167910 -0.0039562402 0.0053313169 -0.0071364079 0.0060850152 -0.0110278651 0.0171514178 0.0000264354 -0.0004391966 0.0002750946 0.0001537967 -0.0004140350 0.0003050302 -0.0000383546 0.0000476349 -0.0001425431 0.0000942038 0.0000793030 0.0004084999 -0.0000706943 0.0002619942 -0.0006630706 0.0001070190 0.0001669832 -0.0002516924 0.0000032555 -0.0001413846 -0.0007731411 0.0000867584 -0.0001247597 0.0004107314 0.0004374535 -0.0005921884 -0.0001601199 -0.0135979969 -0.0737736689 -0.0664823399 -0.0152357578 0.0283921228 -0.0382161366 -0.0021027838 0.1011424478 0.0239272718 -0.0055938688 0.0032778604 -0.0002903138 -0.0006110070 0.0001483864 0.0001561314 0.0018829300 0.0000320293 0.0008548361 -0.0013576600 0.0003421845 0.0001051750 0.0012715127 -0.0013587736 -0.0011109310 -0.0008184957 0.0002248166 0.0000808404 0.0049047591 0.0001344158 0.0023597460 0.0079377737 -0.0054774272 -0.0027856311 0.0000265845 0.0006007431 -0.0007411798 0.0111029845 -0.0022958980 0.0032194222 0.0041389368 -0.0046014924 -0.0032227828 -0.0003066434 -0.0002017709 -0.0004848370 0.0013547626 0.0004237149 -0.0007030590 -0.0001002009 -0.0000657774 -0.0000967713 0.0004127464 0.0005919464 0.0014068065 -0.0005324474 -0.0000049770 0.0003267898 0.0057348689 0.0022642622 -0.0020031687 0.0026480965 0.0014889846 0.0009179275 -0.0000211769 -0.0000331480 -0.0000173644 0.0022636919 0.0012962248 0.0011348331 0.0033610047 0.0029217825 0.0058311874 0.0002566443 -0.0010019067 -0.0009970019 0.0010633191 0.0003006049 0.0012434812 -0.0000310135 0.0000135286 0.0000239501 -0.0000180598 -0.0000157301 -0.0000346095 0.0054133981 -0.0001876920 -0.0008338749 -0.0020091393 0.0029473359 -0.0008033133 -0.0000638710 -0.0022821374 0.0009250972 0.0006685673 -0.0006660244 0.0001229670 -0.0141988131 -0.0013285698 0.0027713313 0.0023366445 -0.0036699519 0.0011884181 -0.0052999729 -0.0036339186 0.0019993129 0.0048799015 0.0018767598 -0.0013485913 -0.0377811541 0.0011657778 0.0121015725 0.0341779608 0.0429492651 -0.0239002105 -0.0012754613 -0.0007349405 -0.0017030288 0.0010512913 0.0005089575 0.0013125640 -0.0010430947 0.0011436099 -0.0027399460 0.0011254963 -0.0004369073 0.0021067797 -0.0101385088 -0.0033159228 -0.0153914766 0.0052340902 -0.0149747185 0.0204269060 0.0010122905 0.0012197026 0.0005840718 -0.0004576856 -0.0004533874 -0.0002728209 0.0056644682 0.0031817575 0.0058368216 -0.0041567621 -0.0079506724 -0.0000484074 -0.0011891181 0.0009126983 -0.0000286193 0.0029529281 -0.0001542213 0.0005879778 -0.0023534124 -0.0016127395 -0.0013986368 0.0107416977 0.0015344880 -0.0018195642 -0.0001332157 0.0014660429 0.0002894460 -0.0019566983 -0.0019100811 0.0003215249 0.0022321776 -0.0020724823 -0.0016788244 -0.0046807961 0.0006127768 0.0024670548 0.0043730120 -0.0120626159 0.0053985047 -0.0097929274 -0.0078195818 0.0122682317 -0.0043135538 -0.0084996437 0.0011230362 0.0474162193 0.0423153445 -0.0231884250 -0.0082616504 0.0698302369 -0.0273304565 -0.0215712198 -0.0428288625 0.0094675202 0.0049659620 -0.0326510194 0.0302775573 -0.0021589703 0.0055464328 -0.0085051351 0.0041900833 0.0031830029 0.0060966025 -0.0466918356 -0.0079182885 -0.0515591609 -0.0057249350 0.0065772317 -0.0072333216 -0.0240073631 -0.0165949087 0.0030750574 -0.0005309400 -0.0000548424 -0.0015573587 0.0031057637 0.0024151694 -0.0018324067 0.0015729790 -0.0015027735 0.0070180390 -0.0017733247 0.0014027986 -0.0001423848 -0.0010705692 -0.0018629493 0.0011570373 -0.0000442809 -0.0002298666 -0.0001293449 0.0000706972 0.0001033424 -0.0000705316 0.0001990382 -0.0000424901 0.0001105663 0.0000355796 0.0000880985 0.0000515229 -0.0001338472 -0.0002198362 0.0000057012 0.0000306574 0.0005525296 0.0000772640 -0.0007039775 0.0011565059 -0.0011559254 -0.0001794533 0.0002112828 -0.0002636320 -0.0000837404 -0.0016046587 -0.0004732096 0.0002774457 0.0001067890 -0.0000656326 0.0001241535 -0.0003997989 -0.0001604355 -0.0008451790 0.0003033060 0.0009034665 -0.0003470734 0.0000398096 0.0000774178 0.0054167603 0.0022985807 -0.0021488533 -0.0029953674 0.0017189636 0.0014124902 0.0003279757 0.0006975528 0.0001761988 -0.0029330231 0.0020474639 0.0016793071 0.0006410572 -0.0065233312 -0.0010643576 -0.0321400526 0.0202607850 0.0166324936 -0.0003268014 -0.0029806620 -0.0017672176 -0.0297300841 0.0192974772 0.0141454085 -0.0021802169 -0.0711476689 -0.0100520479 0.0592726251 0.0349611284 -0.0195948620 -0.0004415499 -0.0000646473 0.0005632185 -0.0003374021 0.0001381895 -0.0140129785 0.0385488481 0.0302679517 0.0152292766 -0.0000608409 -0.0004677284 -0.0003139928 0.0011324122 -0.0000630651 -0.0003125560 0.0000293452 0.0000412406 -0.0001226252 -0.0004404562 0.0000325092 0.0004228855 0.0006294841 -0.0006806900 -0.0000491814 0.0000217506 -0.0000738706 0.0000180062 0.0002268999 0.0001692601 -0.0000833483 -0.0005980763 0.0010367493 -0.0008374598 0.0003519706 -0.0018280547 0.0024836127 -0.0000382358 0.0011939793 -0.0018628996 -0.0003800519 0.0014737913 0.0000281313 -0.0035983043 0.0042447669 0.0017279502 0.0002063211 0.0002670701 0.0008436275 -0.0001408185 -0.0012210141 -0.0032487361 0.0035089931 0.0014965633 -0.0022787177 -0.0006469279 -0.0008210561 -0.0006300818 0.0003533789 -0.0002270136 -0.0002682931 -0.0006665885 -0.0014419444 -0.0009678477 -0.0006974152 -0.0114281247 -0.0098643084 -0.0020587159 0.0065112231 -0.0040159041 0.0005770073 0.0140279190 0.0022289147 0.0648140338 -0.0380985186 0.0035655038 0.0087705211 -0.0084682774 -0.0084208310 -0.0252757435 -0.0020100123 -0.0143646747 -0.0106868982 0.0044343913 0.0012285250 -0.0158566095 0.0205657840 0.0162753705 0.0157134665 0.0004367778 0.0057802166 -0.0554793033 -0.0088260237 -0.0349702069 -0.0550680718 0.0217941436 0.0018373623 0.0025363151 -0.0008251044 -0.0003621836 -0.0721844576 0.0256116218 -0.0051533729 -0.0398920889 0.0562967865 0.0439327254 0.0036973517 0.0026373188 0.0061271817 -0.0160274124 -0.0051476573 0.0085036250 -0.0004764301 -0.0001767388 0.0004335725 -0.0050804729 -0.0070006458 -0.0168374712 0.0069223690 0.0004262941 -0.0038880717 -0.0642302784 -0.0251952710 0.0234097800 -0.0303339846 -0.0163368636 -0.0090158469 0.0006413622 0.0003038796 0.0002658876 -0.0248170730 -0.0163673566 -0.0135498613 -0.0370966991 -0.0326795289 -0.0663448182 0.0013267489 -0.0020728783 -0.0027084427 0.0026354269 0.0008279317 0.0023068719 0.0002910992 0.0002136481 0.0001401217 0.0005516875 0.0002007283 0.0000406193 -0.0616869272 0.0025603521 0.0093088961 0.0235520714 -0.0344516234 0.0093548349 0.0001840177 0.0261996335 -0.0105343352 -0.0079527414 0.0074844881 -0.0013079941 0.1600939957 0.0154649029 -0.0313158876 -0.0276313015 0.0429974718 -0.0137760390 0.0616391606 0.0422743284 -0.0231881842 -0.0567352861 -0.0217163749 0.0156103659 0.4413675174 -0.0140328013 -0.1415766316 -0.3984568946 -0.5007986413 0.2788024688 0.0150945665 0.0087696203 0.0201747807 -0.0123987686 -0.0060699764 -0.0154155612 0.0124862966 -0.0134969839 0.0325000744 -0.0134626692 0.0050864127 -0.0250862104 0.1203476430 0.0396452549 0.1830845829 -0.0624828779 0.1783745970 -0.2433890404 -0.0117938832 -0.0142206579 -0.0068151839 0.0051835552 0.0051624070 0.0030275434 -0.0651845204 -0.0366514120 -0.0668405818 0.0474245139 0.0909762400 0.0005197190 -0.0000042498 0.0000698415 0.0000229213 0.0003088317 0.0001531510 -0.0000803906 0.0000783276 0.0002636212 -0.0003373528 0.0010657800 0.0000896998 -0.0001419165 -0.0004355865 -0.0000216830 0.0005035921 0.0021163929 0.0005228432 -0.0010583666 -0.0003302383 -0.0002540442 -0.0000815670 -0.0000249031 0.0009951887 -0.0009242584 0.0000396469 -0.0000346089 0.0000131371 -0.0001210710 0.0000205906 0.0000288388 0.0000049594 0.0000042012 -0.0000083408 0.0000983098 0.0001667200 -0.0000961153 -0.0001318379 0.0001199297 -0.0000372935 -0.0000967142 -0.0001731753 0.0000336259 0.0000366911 -0.0001319736 0.0001479139 -0.0000073087 0.0000154840 -0.0000152905 0.0000258101 0.0000298141 0.0000163457 -0.0001129893 -0.0000443090 -0.0001697217 -0.0000742346 0.0000476515 -0.0000461672 -0.0000386798 -0.0000473343 -0.0000148928 0.0000755862 -0.0000509712 0.0001737536 -0.0000260209 0.0000076997 -0.0000117682 -0.0000734190 0.0000890204 -0.0002802218 0.0001337898 0.0007309227 0.0005875222 0.0005341344 0.0004901931 -0.0001877527 0.0000300404 0.0000531107 0.0000033726 0.0000697860 0.0001643606 -0.0000350987 0.0001273094 0.0000649568 -0.0000381823 -0.0002059316 -0.0000094424 0.0001461420 -0.0000581260 -0.0002073780 -0.0000535506 -0.0001056602 -0.0000436319 0.0000442487 0.0000772179 0.0003195702 -0.0000524503 -0.0017675540 0.0006175359 0.0012567267 -0.0000504668 -0.0027244783 -0.0010997250 0.0005404381 0.0004409599 -0.0002537949 -0.0004542414 -0.0010156518 -0.0006873635 0.0003435791 -0.0019664968 0.0030041375 -0.0000103187 0.0000992953 0.0000994461 0.0086801188 0.0033465187 -0.0036522419 -0.0053065052 0.0025592107 0.0008307988 0.0000762542 0.0010369770 -0.0000471712 -0.0048385133 0.0032026175 0.0025469946 0.0006234335 -0.0100149321 -0.0019371143 -0.0474551735 0.0296870666 0.0277614743 0.0003493610 -0.0052101179 -0.0002532736 -0.0467623040 0.0305877477 0.0240391375 -0.0035443204 -0.1080609415 -0.0154709150 0.0935448948 0.0539590837 -0.0283400783 0.0000013874 0.0000413622 0.0000228637 0.0000076471 -0.0002531241 -0.0004413049 0.0001619460 0.0001261884 0.0000653781 -0.0027025202 0.0055389630 0.0009258870 -0.0062411953 0.0048328506 0.0036668693 0.0000833993 -0.0020414549 0.0014269952 0.0003535403 0.0000138356 0.0000380766 -0.0000498408 -0.0000990768 0.0000720768 -0.0001503900 -0.0000966824 0.0002272033 0.0003435797 -0.0004713246 -0.0003282885 0.0239118250 -0.0315119822 0.0463559498 -0.0428209650 0.0671277188 -0.1083956987 -0.0003874863 0.0007046150 -0.0005458093 -0.0001936160 0.0004626801 -0.0002338972 -0.0001285400 0.0002274550 0.0002139852 0.0005608894 0.0003471984 -0.0006829546 -0.0003135690 0.0002502941 -0.0004081418 0.0003209055 0.0003318428 -0.0002676382 -0.0004557924 0.0001712126 0.0052746170 -0.0009876888 0.0024183091 -0.0016864145 -0.0041280069 0.0026203889 -0.0001772171 0.0897938864 0.4640185700 0.4222386732 0.0993785547 -0.1430584991 0.2575130404 0.0172330681 -0.6493055346 -0.1584245302 0.0001416464 -0.0000876498 0.0000044064 -0.0000142803 -0.0000520840 -0.0000437627 -0.0000629348 -0.0000074538 -0.0000426724 -0.0001110460 0.0000245836 0.0000117195 -0.0000228460 0.0000701738 0.0000529578 0.0000393438 0.0000277671 0.0000534837 -0.0002260789 0.0001041003 -0.0003092285 0.0001467531 -0.0002022877 -0.0001893376 0.0000178439 0.0000317315 -0.0002216816 0.0002004563 0.0000036595 0.0002086449 -0.0001599819 0.0002879632 0.0001630662 -0.0000091399 -0.0000121437 -0.0000066952 -0.0000698680 -0.0000027063 0.0000167640 0.0001655118 0.0000828913 0.0000446602 0.0000128532 0.0000058101 -0.0000335931 -0.0000381475 -0.0000333585 -0.0000014738 -0.0003877099 -0.0002329515 0.0001049260 -0.0001936561 -0.0001316975 -0.0001718131 -0.0000137172 -0.0000195687 -0.0000197628 -0.0001380170 -0.0001091395 0.0000257299 -0.0004604247 -0.0003405043 -0.0005650807 0.0000534384 -0.0000631542 -0.0000414397 0.0001656324 0.0000095629 0.0001409143 0.0000122289 -0.0000159962 -0.0000445540 -0.0000560402 0.0000178023 0.0000507013 -0.0000924372 0.0000186710 0.0000099029 0.0001358051 -0.0000271105 -0.0000095291 -0.0000700506 0.0000582126 -0.0000118214 0.0000024437 0.0000005993 0.0000019482 -0.0002602400 0.0000782864 0.0000044730 0.0000748303 -0.0001380580 0.0000345421 0.0001649834 0.0000968174 -0.0000791474 -0.0001571326 -0.0000640855 0.0000555742 0.0013897715 0.0000070513 -0.0002326438 -0.0011395253 -0.0014545401 0.0007238896 0.0000733857 0.0000558126 0.0000750521 -0.0000682120 -0.0000323398 -0.0000860417 0.0000719340 -0.0000664080 0.0001672940 -0.0000757080 0.0000345949 -0.0001382676 0.0006692756 0.0002241152 0.0009880749 -0.0003211560 0.0009948849 -0.0013838429 -0.0000482279 -0.0000691696 -0.0000137834 0.0000095634 0.0000062178 0.0000088611 -0.0001457234 -0.0001351330 -0.0001586771 0.0001375305 0.0002081824 -0.0000104212 0.0007275999 -0.0023910161 -0.0002071838 -0.0040447037 -0.0026036588 0.0002607522 0.0051171810 0.0067569456 0.0015028164 -0.0063900283 -0.0010307520 0.0021537523 0.0014650732 -0.0030648420 -0.0015828713 0.0041176686 0.0040685046 -0.0007056398 -0.0008043238 0.0024643258 0.0029095245 0.0105720668 -0.0026925296 -0.0042589676 0.0011357814 0.0015273136 -0.0004670894 -0.0214671495 0.0001577114 0.0025086711 -0.0008536499 -0.0016031673 0.0006279872 -0.0003142265 0.0013416951 -0.0007755833 -0.0001671437 0.0046509413 -0.0018985996 -0.0018928051 -0.0016808774 -0.0024533982 -0.0019782000 -0.0066448870 0.0023496758 0.0001667324 -0.0011265515 0.0009466792 0.0033186646 0.0077686280 0.0000930655 -0.0012458547 0.0068243315 0.0138230236 -0.0002593539 0.0001183572 0.0015830585 -0.0014594303 -0.0008946176 0.0002402246 0.0022505938 -0.0008820177 0.0018528730 -0.0017863343 -0.0006844818 0.0009878440 -0.0011110137 0.0015187192 -0.0041667188 0.0066550922 -0.0091749839 -0.0101474930 -0.0095634215 -0.0094291232 0.0066449027 -0.0018352761 0.0000055725 0.0006813378 -0.0077613608 0.0029924847 0.0064374222 0.0036087152 -0.0010755293 -0.0023977011 0.0022522089 -0.0030084767 -0.0029169802 0.0023667961 0.0049334060 0.0001887794 -0.0038619614 -0.0011588084 0.0024031017 0.0033877740 -0.0196231786 -0.0110775752 0.0264028958 -0.0132235134 -0.0183022416 0.0017284594 0.0312574712 0.0102812771 -0.0013662884 -0.0030580708 0.0000374144 0.0024461817 0.0023328559 -0.0014928626 -0.0022174553 0.0063537311 0.0031195524 0.0042940439 -0.0055432643 -0.0028416046 0.0002017894 -0.0004942785 -0.0001325372 -0.0002962318 -0.0009497607 -0.0000424455 0.0001105815 -0.0011758797 -0.0001602725 -0.0000532421 0.0024025129 0.0003780346 -0.0021433863 0.0007882171 0.0009855651 -0.0096267821 0.0045583702 0.0050920068 0.0004019527 0.0004240975 0.0000543439 -0.0045481324 0.0055076414 0.0024385692 -0.0018908894 0.0109611485 0.0024369313 -0.0010717870 -0.0011241079 0.0001783382 0.0010313263 0.0027700449 -0.0000181161 0.0024831826 -0.0077753415 -0.0041779097 -0.0018518917 -0.0030785146 -0.0001796399 -0.0019571041 -0.0060106462 -0.0014713353 0.0024740651 -0.0034272407 -0.0030942901 -0.0004792046 0.0008384168 0.0008262932 0.0000802697 0.0002312630 -0.0000082082 0.0007801073 -0.0004750040 0.0000236996 -0.0000669042 -0.0001614312 0.0001741435 -0.0000492121 -0.0000474592 0.0000443059 0.0030990299 0.0050541749 0.0020213292 -0.0089522881 -0.0044010958 0.0006550659 -0.0048964828 -0.0019291969 0.0001186995 -0.0019322212 0.0051542609 0.0011705069 -0.0023263436 -0.0008696121 -0.0019318623 0.0003169196 0.0000613114 -0.0003174118 -0.0001864167 0.0000197039 -0.0002213649 0.0001696897 0.0004736718 -0.0004284819 0.0001071818 0.0000478293 -0.0001354297 0.0000737421 -0.0001819493 -0.0005166163 -0.0000998206 -0.0000704325 -0.0000114016 0.0215946035 -0.0171787549 -0.0081767889 0.0013841460 0.0386004740 0.0228096769 0.0162247064 -0.0116038784 -0.0221821812 0.0031126807 -0.0026623323 0.0001666912 -0.0024414404 0.0008290052 -0.0006090018 0.0005894056 -0.0010416913 -0.0005001239 0.0043154486 -0.0013145688 -0.0001694260 0.0008411349 0.0005000489 0.0011957432 -0.0010064760 0.0009125321 0.0002928827 -0.0258986283 0.0027592077 -0.0107328225 0.0103937416 -0.0092490803 -0.0068947913 -0.0005779137 0.0001465570 -0.0000437606 0.0052731472 0.0003711848 0.0029003783 -0.0182287743 0.0176984276 0.0105937916 0.0543435776 0.0334427308 0.0233201846 -0.0373130553 -0.0276561820 -0.0207958572 -0.1197251766 -0.0652597064 -0.0437071748 -0.0427139529 -0.0277725844 -0.0085999831 0.0552380550 0.0364250093 0.0159691443 0.5585216544 0.2491404722 -0.0841366412 -0.1843138753 -0.1354290100 -0.2153690874 0.0143673852 0.0080316122 0.0059964171 -0.2862966377 -0.1198834567 0.0392365849 0.3488693679 0.2813363090 0.4093529336 -0.0001982570 0.0005571865 0.0008301455 -0.0006584184 -0.0002996111 -0.0006848149 -0.0023088359 0.0192123614 0.0345713759 0.0321125363 -0.0036442413 -0.0241416487 0.0020574097 0.0010141148 -0.0007370943 0.0038491291 0.0002040117 -0.0008304953 -0.0013198252 -0.0010148911 0.0006086361 -0.0001117677 -0.0003591878 0.0001397403 -0.0076539703 -0.0006068735 0.0016205752 -0.0024972601 0.0039470482 -0.0009992308 0.0008779729 0.0008263180 -0.0003700864 -0.0017173695 0.0001775773 0.0002003695 0.0076485953 -0.0003266273 -0.0030785829 -0.0112705505 -0.0131605245 0.0072481815 -0.0015491162 -0.0032648978 0.0002603961 -0.0034953006 -0.0028733955 -0.0027851184 0.0028817560 0.0013420002 0.0033953495 -0.0006182344 0.0008720452 -0.0015402576 0.0174096977 0.0090091327 0.0239732098 -0.0022698618 0.0078289149 -0.0106725951 -0.0018287888 -0.0015183881 -0.0017617806 0.0016425934 0.0013146073 0.0014484737 -0.0195615339 -0.0088112538 -0.0217774941 0.0174505655 0.0328439594 0.0003699580 0.0002896531 0.0027404379 0.0010073986 0.0112457375 0.0055510651 -0.0017682279 -0.0022924073 -0.0019785355 -0.0023198289 0.0063964928 -0.0004319265 -0.0025201889 -0.0000930636 0.0029185638 -0.0001530373 -0.0063864318 -0.0030283613 0.0017393723 0.0063424491 -0.0058485512 -0.0042509257 -0.0023855041 -0.0015261558 0.0063200307 0.0018209861 -0.0010565520 0.0041555086 -0.0051939417 0.0028303513 0.0035720706 0.0018809940 0.0006748766 -0.0015496228 -0.0003479625 0.0019353191 -0.0010498674 -0.0007682973 0.0007414934 -0.0004914535 -0.0006085583 -0.0014203009 0.0005084379 0.0003082218 -0.0004808706 0.0005015565 -0.0000336618 0.0004914866 -0.0005542045 -0.0002877363 -0.0005276845 0.0001735790 -0.0004987733 0.0001324369 -0.0014641360 -0.0001439350 0.0003707774 -0.0003215793 0.0008049905 0.0005310603 0.0003688678 -0.0004285088 -0.0002481693 -0.0013582149 0.0000251310 0.0001482891 -0.0000714630 0.0013088751 -0.0001059070 0.0036002529 0.0075636899 -0.0182890845 -0.0168344483 0.0095979888 0.0113657217 -0.0031542616 0.0018108581 0.0043052660 0.0005655398 -0.0204668273 0.0090631274 0.0171013127 0.0112895997 -0.0071588902 -0.0102803043 0.0024244921 -0.0089263779 -0.0048047360 0.0055943629 0.0116151193 0.0004087541 -0.0154072555 -0.0043301561 0.0108071524 0.0177771134 -0.1029366159 -0.0409943739 0.0437829016 -0.0261687197 -0.0356607642 0.0037444171 0.0922080795 0.0312910521 -0.0032535730 -0.0098265239 -0.0004208928 0.0087091193 0.0089052223 -0.0055097059 -0.0206721837 0.0334157056 0.0152145722 0.0160358706 -0.0187769902 -0.0099856349 0.0008410000 -0.0025699680 -0.0007006467 -0.0040411956 -0.0014450292 0.0013842373 -0.0006970916 -0.0013174563 -0.0003213900 0.0027946048 0.0061397754 -0.0001742564 -0.0076354888 -0.0002428907 0.0031950678 -0.0616176615 0.0335725278 0.0326776227 0.0034020374 0.0397810719 0.0102913030 0.0164836018 -0.0023245406 -0.0090069471 -0.0080444246 0.0107406787 0.0042660109 -0.0113019318 -0.0098519572 0.0040433401 0.0018560331 0.0110906474 0.0012704233 0.0022598063 -0.0554535402 -0.0376354019 0.0013648446 0.0011844803 0.0006014887 0.0010071315 0.0125687550 0.0027744840 -0.0060037232 0.0079931289 0.0068066111 0.0031050208 -0.0008033614 -0.0015476082 -0.0005417198 -0.0000194475 0.0000771897 -0.0000100436 -0.0001188819 -0.0001472230 0.0004442990 0.0001365617 -0.0001473733 -0.0000540102 0.0000559264 -0.0000037816 -0.0091274496 -0.0110783924 -0.0030198589 0.0225772033 0.0095692632 -0.0029747324 0.0014650672 -0.0000611015 -0.0000280601 0.0004906753 -0.0012075573 -0.0002260407 -0.0005049397 0.0013978596 0.0008336140 -0.0050086325 -0.0032741928 0.0031786175 0.0008158807 -0.0014453352 -0.0022074513 0.0000971539 0.0007410811 -0.0007177121 -0.0007267262 -0.0008316127 -0.0009834126 0.0004148723 -0.0009498748 0.0001967889 0.0008695169 -0.0002619002 0.0000577177 -0.0550404418 0.0435898063 0.0212710870 -0.0027331499 -0.0971531550 -0.0569105773 -0.0416072097 0.0266000872 0.0553786136 -0.0024437115 -0.0114237894 -0.0129123971 -0.0720032937 0.0286250501 -0.0059092504 0.0487590339 -0.0232285642 0.0068642599 0.1128459809 -0.0372304462 -0.0063883845 0.0393623524 -0.0126105175 0.0088338326 -0.0444020135 0.0250681524 0.0091627038 -0.5388937619 0.0671133140 -0.1994857732 0.3179099576 -0.2451081831 -0.1654177177 -0.0127114483 0.0034939602 -0.0002644023 0.2097780971 -0.0205741286 0.0731291948 -0.3831639064 0.3692729629 0.1997333945 -0.0018277453 -0.0011478331 -0.0007134098 0.0008532590 0.0008999207 0.0009873148 0.0047346575 0.0025742242 0.0017724008 0.0016837262 0.0009141658 -0.0000818713 -0.0021001686 -0.0015098978 -0.0007926334 -0.0229289275 -0.0100819600 0.0038414671 0.0054120459 0.0039618562 0.0069779141 -0.0006592538 -0.0000702116 0.0000035818 0.0100864541 0.0048269811 -0.0020102389 -0.0152439285 -0.0123276290 -0.0184971425 -0.0069651583 0.0182680406 0.0262184035 -0.0211863559 -0.0092462732 -0.0223479678 0.0001054310 -0.0008984960 -0.0015873796 -0.0012556512 0.0001627080 0.0009706250 0.0010276575 0.0000486271 -0.0001518910 -0.0001887498 -0.0001339583 0.0001217055 -0.0004100131 -0.0001118017 0.0000694673 -0.0005262028 -0.0002364216 0.0001883225 -0.0075535653 0.0004954303 0.0010734631 0.0003537805 -0.0019049702 0.0007091742 0.0007234750 0.0004665629 -0.0002754230 -0.0003714089 -0.0003169259 0.0001393133 0.0064382601 -0.0003495218 -0.0017782521 -0.0029248999 -0.0039162559 0.0021861385 0.0007068320 0.0000637863 0.0011417710 -0.0002748831 -0.0002038176 -0.0002295786 0.0003852518 -0.0001847347 0.0007658034 -0.0005081555 -0.0002616462 -0.0006220808 0.0012202379 0.0002573086 0.0021479625 -0.0016414834 0.0034761983 -0.0052612953 -0.0001359469 0.0000598950 -0.0002828783 0.0000458136 0.0000532218 0.0000139509 -0.0003685696 -0.0000023853 -0.0004466312 0.0005967648 0.0011996368 -0.0000196144 0.0009019687 -0.0063419913 -0.0010413495 -0.0230591499 -0.0068013097 0.0006890175 0.0080435072 0.0084247360 0.0015821550 -0.0156442987 -0.0005726898 0.0063305027 -0.0009463551 -0.0068211741 -0.0016249032 0.0093938951 0.0128791581 -0.0012241572 -0.0086318510 0.0105934464 0.0122383075 0.0226037302 -0.0035365833 -0.0109562760 0.0002761093 -0.0001637565 0.0007974818 -0.0002567192 0.0001277590 0.0006972151 0.0002450396 -0.0001491018 -0.0001725966 -0.0000151004 0.0000110781 0.0000101514 0.0007968930 0.0004621493 -0.0003173821 0.0003765166 -0.0003175885 0.0007990531 0.0002707121 0.0005320691 -0.0001396345 -0.0000585770 0.0002952684 -0.0003774367 -0.0003699566 -0.0007104628 0.0000171348 0.0005397425 -0.0000640036 -0.0008478202 0.0001705903 0.0000126821 -0.0003476921 0.0000870055 0.0002445633 0.0003143921 -0.0002983817 0.0007066498 -0.0024799429 -0.0006855071 -0.0005115582 0.0009120609 0.0009012064 -0.0009844484 0.0037342145 -0.0018847276 0.0014889797 0.0083935028 0.0000104098 0.0001372679 -0.0005462134 0.0004459822 0.0000583084 -0.0001047740 0.0008208803 -0.0002011757 -0.0005725004 -0.0000759911 -0.0001246073 -0.0002133925 -0.0001794853 -0.0000702655 0.0002221566 -0.0004439325 -0.0000267196 -0.0001194821 -0.0003910228 -0.0005491893 0.0006357866 0.0004611217 -0.0000418898 0.0007844182 0.0008276359 -0.0003997135 -0.0018825413 0.0014858664 0.0013000194 0.0041511498 -0.0005311257 -0.0002357838 0.0000329964 0.0015359258 0.0012038036 0.0006692560 0.0053158599 -0.0027843402 0.0143993518 -0.0008166630 0.0002343207 -0.0008469636 -0.0010328815 0.0002959597 0.0009348329 -0.0000887754 -0.0001507930 0.0002243332 0.0003971449 0.0005686535 0.0001469687 0.0015472952 -0.0003479340 -0.0007207257 -0.0007823933 0.0003103163 0.0000337563 -0.0015087920 0.0006394911 -0.0007012739 0.0005279048 0.0074882050 0.0006979412 0.0130882042 -0.0079192917 -0.0072014203 -0.0003042265 -0.0025223255 0.0014417160 -0.0094602303 -0.0036763500 0.0006000457 -0.0000516523 0.0006475474 0.0001487492 -0.0014993386 -0.0056077317 -0.0030610645 0.0006444130 0.0005411457 0.0001180683 -0.0121443267 -0.0662252316 -0.0247772521 0.0344998354 -0.0456269127 -0.0398658662 -0.0186445481 0.0037386054 0.0091595018 0.0018454696 0.0009775800 0.0003953823 0.0002475204 0.0000215114 0.0001855062 -0.0000916435 -0.0000067227 -0.0001862950 0.0008213762 0.0000619560 0.0000118719 0.0558383112 0.0649076164 0.0174268285 -0.1350582622 -0.0566905675 0.0185325833 -0.0003597530 0.0013286706 -0.0008076383 -0.0004120561 0.0017463870 0.0000071172 -0.0003663626 0.0000708978 -0.0002180586 -0.0004024742 -0.0001682572 0.0015913958 0.0004336672 -0.0006730359 0.0018766309 0.0005098930 -0.0001912166 -0.0000899005 -0.0007003681 -0.0012637923 0.0004294390 0.0001103316 0.0013863329 0.0007517481 -0.0023244372 0.0002448625 -0.0007084969 0.3290804102 -0.2634055086 -0.1305153007 0.0159539878 0.5831394988 0.3399268751 0.2495335363 -0.1600711784 -0.3313123313 -0.0003566143 -0.0022204327 -0.0024540919 -0.0135596188 0.0053914439 -0.0013515203 0.0092463183 -0.0045160266 0.0011833677 0.0208606879 -0.0068742972 -0.0011617384 0.0073338518 -0.0022399459 0.0017758872 -0.0081960370 0.0047501179 0.0018891059 -0.1029371430 0.0115436871 -0.0370457624 0.0608371660 -0.0471651398 -0.0318660334 -0.0024244430 0.0007234380 0.0000677151 0.0404809893 -0.0037154651 0.0143129396 -0.0723058264 0.0700333336 0.0379314736 -0.0043199729 -0.0025070130 -0.0017852292 0.0029433770 0.0020093994 0.0020801553 0.0084527027 0.0047020351 0.0033178801 0.0030335127 0.0018207908 0.0000966807 -0.0037889893 -0.0025775498 -0.0012873733 -0.0446309369 -0.0200000402 0.0069477077 0.0145154642 0.0123871392 0.0179545028 -0.0008622471 -0.0005738354 -0.0003562985 0.0223699890 0.0094280525 -0.0039132975 -0.0255983958 -0.0207259326 -0.0305751577 -0.0013052616 0.0032337586 0.0046504780 -0.0038832181 -0.0016297535 -0.0039874884 0.0001494765 -0.0014930354 -0.0026383217 -0.0022866946 0.0002378534 0.0017087122 -0.0002805753 -0.0000771193 0.0000812055 -0.0008590491 -0.0000472603 0.0001727618 0.0002430405 0.0000491615 -0.0000657478 0.0000327221 0.0000384553 -0.0000161384 0.0002525977 0.0000565183 -0.0000729721 0.0006691587 -0.0011284952 0.0003138246 -0.0002692236 -0.0001586385 0.0000879669 0.0003947344 -0.0000221609 -0.0000574503 -0.0021725650 0.0000984137 0.0006725870 0.0029633518 0.0035812960 -0.0019246485 0.0000413970 0.0002200191 -0.0001257850 -0.0000453498 0.0001820038 -0.0001854905 -0.0002287646 -0.0000664106 -0.0002992415 0.0000800465 -0.0001063372 0.0002015991 -0.0022706386 -0.0011322968 -0.0031626043 0.0005450129 -0.0017624934 0.0022694980 0.0002005258 0.0000783579 0.0002491702 -0.0000577668 -0.0001197625 0.0000177431 0.0021466523 0.0008789803 0.0025061740 -0.0006692727 -0.0014013855 0.0000498687 -0.0027247945 0.0331249549 0.0120080283 0.1344731271 0.0537290135 -0.0120192716 -0.0411035434 -0.0401966090 -0.0221437469 0.0754688771 -0.0143233475 -0.0376609785 0.0039965214 0.0363347934 0.0138727002 -0.0147442533 -0.0767835396 -0.0165616653 0.0436506238 -0.0571723502 -0.0633718985 -0.1307190488 0.0260563592 0.0554131459 0.0003142969 -0.0003955110 0.0013962447 0.0022863795 0.0002260146 0.0010758028 0.0004871506 -0.0001077701 -0.0003755625 0.0001274164 0.0007908998 -0.0004572640 -0.0001105962 0.0007551291 -0.0002933004 -0.0004606721 -0.0003952080 -0.0003698534 -0.0002007470 -0.0007050493 0.0002021464 0.0000355048 0.0000623365 -0.0000276210 0.0003654257 0.0004926639 0.0001495617 -0.0015371451 -0.0000082525 -0.0007144417 0.0006347567 -0.0002898438 0.0003366527 0.0003389364 0.0000292713 0.0000812817 -0.0017294535 -0.0003059198 0.0000912115 0.0022798194 0.0010929580 -0.0016353797 0.0007057004 -0.0021697320 0.0019866292 -0.0928099921 0.1434480016 0.1501739853 -0.0669399284 -0.0742294777 0.0201257356 -0.0042230009 -0.0198844418 -0.0048496540 0.1208886074 -0.0563846275 -0.1050590416 -0.0546730699 0.0341441525 0.0486223916 -0.0148082299 0.0514386827 0.0283018760 -0.0283243440 -0.0681959429 -0.0057419257 0.0656401520 0.0153113870 -0.0383030987 -0.0842556404 0.4965794887 0.1986437153 -0.2295917873 0.1416847037 0.1851501757 -0.0181571650 -0.4358134706 -0.1467846606 0.0265722317 0.0523636968 -0.0040442978 -0.0445679281 -0.0452376600 0.0269129067 0.0728637835 -0.1450393076 -0.0602993783 -0.0813159356 0.0986157191 0.0532094535 -0.0045057867 0.0080089519 0.0030302659 0.0071002841 0.0169326294 -0.0003065449 -0.0012319880 0.0244908017 0.0030996837 0.0012515914 -0.0433839605 -0.0067594915 0.0384212437 -0.0108139757 -0.0174305209 0.2002258399 -0.0976534633 -0.1045948845 -0.0061532897 -0.0078943139 -0.0004880361 0.0807759217 -0.0987715969 -0.0450799103 0.0348605647 -0.1843486598 -0.0410465268 0.0154675341 0.0184590833 -0.0045510150 -0.0175436566 -0.0377078816 0.0023975308 -0.0299436034 0.0986836156 0.0050243387 -0.0000600509 -0.0000920557 0.0000051796 0.0057118651 -0.0048248969 0.0087142813 -0.0010525070 0.0017587112 0.0024942238 0.0009096900 0.0001844722 -0.0005365296 -0.0000422089 0.0001770415 0.0001852014 -0.0000470412 0.0001659957 -0.0001237813 0.0002205168 0.0004085585 -0.0025280265 -0.0000963494 -0.0002307083 -0.0000045702 -0.0030726444 -0.0023413993 -0.0010510237 0.0064029401 0.0022146792 -0.0007677142 -0.0004120897 -0.0016847697 0.0011817964 -0.0006081374 0.0005740344 0.0011757809 0.0013462791 -0.0018230625 -0.0009190314 -0.0015437768 0.0004769202 0.0110236074 0.0018861997 -0.0001253837 0.0108010431 -0.0026682512 -0.0061438844 0.0038955340 -0.0000190800 -0.0001990888 -0.0002260793 -0.0000250241 -0.0003282398 -0.0000052447 0.0003727427 0.0010221611 0.0006214537 -0.0157371478 0.0118435919 0.0059956999 -0.0007913121 -0.0270460728 -0.0161997934 -0.0117369689 0.0087251299 0.0157614944 -0.0003329616 -0.0036531400 -0.0038478926 -0.0210381813 0.0080155723 -0.0024522150 0.0144782834 -0.0067699769 0.0014153750 0.0291082152 -0.0094658243 -0.0013334776 0.0099947799 -0.0026441917 0.0029631280 -0.0107048313 0.0067430323 0.0032367280 -0.1530996347 0.0161675246 -0.0543165498 0.0938627727 -0.0765238372 -0.0478447682 -0.0031763184 0.0008985216 0.0002842340 0.0566079019 -0.0046597294 0.0206682493 -0.1035968546 0.1016784572 0.0554800080 0.0035806413 0.0020484025 0.0011774421 -0.0021043439 -0.0018475346 -0.0017527302 -0.0074494121 -0.0039495766 -0.0027339151 -0.0036549076 -0.0020675913 -0.0003968013 0.0039743263 0.0027156446 0.0014105669 0.0377938847 0.0168873979 -0.0062438837 -0.0134360623 -0.0103139182 -0.0170723335 0.0019256911 -0.0000547718 -0.0005217033 -0.0245090984 -0.0117625122 0.0045337971 0.0256513783 0.0202730383 0.0303913444 -0.0018985926 0.0045894778 0.0064024228 -0.0056839882 -0.0021266265 -0.0056418877 0.0001212302 0.0012067709 0.0022849156 0.0012282620 -0.0001386921 -0.0007051536 -0.0006438376 0.0000782189 0.0000935000 -0.0002945145 0.0003923446 -0.0000974450 -0.0000489568 -0.0000082887 -0.0000062082 0.0001479437 0.0000441714 -0.0000386538 -0.0021053260 0.0002066891 0.0002842532 0.0019771213 -0.0033475946 0.0009992619 0.0003221188 -0.0000902048 -0.0000632344 -0.0000517007 -0.0000794014 0.0000327204 0.0004015156 -0.0000198384 0.0001338873 0.0008755183 0.0012376510 -0.0005647274 0.0001110920 -0.0002979016 0.0004051857 -0.0000595093 -0.0003272608 0.0001803999 0.0003186958 0.0000817621 0.0004069519 -0.0001878483 0.0000251287 -0.0003179266 0.0022348654 0.0011656468 0.0032979876 -0.0007903066 0.0020847907 -0.0028791142 -0.0002188787 0.0000104337 -0.0003674206 0.0001039774 0.0001533386 0.0000282362 -0.0023635684 -0.0008561977 -0.0028321768 0.0009013539 0.0017972272 -0.0000255651 -0.0022460680 0.0024505834 -0.0056471066 -0.0038315885 -0.0149883564 0.0080283665 -0.0036422934 -0.0058134757 0.0116528898 0.0141650362 0.0153670410 0.0007400551 0.0006493690 0.0015901057 -0.0041450800 -0.0308020988 0.0040548041 0.0185654689 0.0043796617 -0.0003851636 -0.0021470900 0.0053397677 -0.0070155145 0.0062879083 -0.0017216401 -0.0010747340 0.0003517914 0.0362152356 -0.0042253545 -0.0020289172 -0.0000487086 -0.0008962349 0.0002254401 0.0023533199 0.0005188940 -0.0003996819 -0.0001802682 0.0000779364 -0.0000383362 -0.0002576605 -0.0003411924 -0.0001779668 -0.0004670046 0.0000365288 -0.0000787052 0.0000558071 0.0001008165 0.0000376723 0.0001623617 -0.0001065515 0.0002912945 -0.0031609659 -0.0012294625 -0.0033612214 -0.0000144478 -0.0000235982 0.0000799031 -0.0004074195 -0.0003112324 -0.0001777544 0.0005548948 0.0002372160 0.0004812436 -0.0007881150 -0.0005010530 0.0005844211 -0.0003834012 0.0003271478 -0.0017123570 -0.0669422664 0.0571149450 0.0929717386 -0.0205324123 -0.0179677821 0.0064097095 0.0000402346 -0.0005371703 -0.0001173602 0.0135959403 -0.0005193917 -0.0090992932 -0.0023539305 0.0022807600 0.0022167338 -0.0030396844 0.0058703630 0.0041547822 -0.0022101414 -0.0135892799 -0.0037457460 0.0039103974 0.0068343233 0.0000843336 -0.0039613267 0.0390351231 0.0147607545 -0.0372089244 0.0201880152 0.0285965081 0.0005363281 -0.0785758180 -0.0265411001 0.0004483800 0.0015289393 -0.0006719342 0.0123816984 0.0197145029 0.0002047397 -0.1195689165 0.1244635888 0.0869493023 0.0390106173 -0.0385249432 -0.0254965122 -0.0012854265 -0.0129879727 0.0003212716 -0.0326894810 0.0043856403 0.0143801811 -0.0099100846 0.0447692993 0.0084231943 0.0440063242 -0.0173246905 -0.0224375729 -0.0254451217 -0.0221726990 0.0078179682 -0.3756968750 0.2174761733 0.1936622586 0.0139934214 0.5399087444 0.1024438446 0.4356660603 -0.2725507875 -0.2197223853 -0.0369521371 -0.2179686160 -0.0207511137 -0.1218815976 -0.0839910172 0.0360599156 -0.0032917496 -0.0056563844 -0.0005434502 -0.0048228831 -0.0045938953 0.0196147946 -0.0001680298 -0.0000294953 -0.0000032952 -0.0044282315 -0.0002017780 -0.0061321596 0.0005522510 -0.0051367891 -0.0036197598 0.0036162455 0.0028751566 0.0008296252 0.0004609873 0.0002594525 -0.0003982301 -0.0004871337 -0.0004097171 0.0004135396 -0.0010772894 -0.0001880908 -0.0003943498 -0.0004340737 -0.0005756981 -0.0001572131 -0.0041259292 0.0031903946 0.0040833830 0.0023854474 -0.0029315794 -0.0027202646 0.0003907113 0.0010724184 -0.0004270096 -0.0009353696 0.0021328098 -0.0013449192 0.0014299243 -0.0016738712 0.0002401005 0.0048598154 0.0034785550 -0.0010013960 -0.0021917042 0.0055101415 0.0049966070 0.0009832627 -0.0077811760 0.0054496573 0.0003760409 0.0007797876 0.0017258556 -0.0000949829 -0.0008952955 -0.0010071863 -0.0002298111 0.0031791097 0.0015079699 -0.0082722428 0.0055891003 0.0049689995 0.0010926493 -0.0054598596 -0.0045809840 -0.0075249941 0.0032510184 0.0066852005 0.0028108546 -0.0005971817 0.0005062337 0.0048084418 -0.0011995462 0.0013815853 -0.0033612366 0.0018493481 0.0001434512 -0.0031732061 0.0011399395 0.0000891779 -0.0023856753 0.0004008566 -0.0008625247 0.0019546932 -0.0019207014 -0.0013096961 0.0318447461 -0.0022142739 0.0111729955 -0.0284238789 0.0244805511 0.0157332309 0.0024767813 -0.0015216704 0.0024131195 -0.0263701273 0.0016008718 -0.0106965532 0.0198004304 -0.0201388163 -0.0114522181 0.0003398717 0.0002047826 0.0001161033 -0.0001958244 -0.0001182418 -0.0001064707 -0.0009410498 -0.0004883629 -0.0002616808 -0.0003392825 -0.0001831371 -0.0001565161 0.0004715749 0.0002568205 0.0000624019 0.0031391164 0.0013321292 -0.0004492948 -0.0003753452 -0.0006813248 -0.0004265325 0.0000561647 -0.0000705733 0.0000431846 -0.0009389358 -0.0010549468 0.0001520354 0.0022869655 0.0019434290 0.0025178851 -0.0003573931 0.0019146869 0.0017974534 -0.0026299813 -0.0008112149 -0.0035360830 -0.0000241590 0.0002001380 0.0003801391 0.0003385545 -0.0000037413 -0.0002829915 -0.0078320386 0.0001930271 0.0012481422 -0.0023737004 0.0020153244 -0.0003922514 0.0009573491 0.0011019293 -0.0006068617 0.0018026317 0.0011311445 -0.0007206396 0.0100925170 0.0006922956 -0.0019648692 0.0108545441 -0.0155009634 0.0041187133 0.0009603655 -0.0013185411 0.0001701767 0.0001665801 -0.0003060320 0.0000965325 -0.0064846489 -0.0001658027 0.0026021706 0.0087621562 0.0117722048 -0.0059603314 0.0001218971 -0.0001774309 0.0001008708 0.0004944762 -0.0000889036 0.0007754683 -0.0000179842 0.0000500063 -0.0000440314 -0.0000102073 0.0000425371 -0.0000409928 0.0011506952 0.0006891315 0.0015933984 -0.0001746542 0.0007522405 -0.0009832403 -0.0001000635 0.0001877153 -0.0002798474 -0.0000224599 0.0001205062 -0.0001253969 -0.0018622864 -0.0006079538 -0.0026045414 -0.0005799790 -0.0010085231 -0.0001173055 0.0002564176 -0.0008814140 0.0033317951 0.0070326741 0.0118581396 -0.0065995076 0.0010674591 0.0042404622 -0.0083721311 0.0035721084 -0.0031656847 0.0008057277 0.0019103492 0.0003928774 0.0029023197 0.0093610296 -0.0057092616 -0.0048043821 -0.0037524858 -0.0028780290 -0.0072692461 -0.0087793745 0.0057517428 -0.0022735344 -0.0287720649 -0.0207956092 0.0121620626 0.7126672994 -0.0918477717 -0.0307298099 0.0028151404 -0.0270901364 0.0062865240 0.0545381115 0.0088349586 -0.0101570471 0.0076975145 0.0223868892 -0.0104703658 -0.0071530060 -0.0120789824 -0.0016298329 0.0014116523 -0.0007444426 0.0138825457 0.0042275877 0.0070615193 -0.0011699148 -0.0031375669 0.0016764609 -0.0041728125 0.0779111376 0.0391908539 0.0765623207 -0.0018489479 0.0015625601 0.0004943703 -0.0159741567 -0.0059305378 0.0013040288 0.0020761413 -0.0005443316 0.0003281619 -0.0009062614 0.0003007716 0.0008331592 -0.0003613597 0.0009364216 -0.0004210725 0.0037701115 -0.0038999096 -0.0070493331 0.0010017395 0.0003966111 0.0000516019 -0.0000076830 -0.0000638164 -0.0000623378 -0.0016001213 0.0004308413 0.0012305582 0.0005381189 -0.0002565568 -0.0003451364 0.0003450102 -0.0006127499 -0.0004640303 0.0001779463 0.0011735689 0.0003270427 -0.0003528661 0.0002157876 0.0002223948 0.0004682716 -0.0052467670 -0.0026971728 0.0036125145 -0.0020001355 -0.0027381054 -0.0000853788 0.0063053425 0.0021040043 -0.0001889695 -0.0004986342 0.0000886860 -0.0003654773 -0.0009309510 -0.0002154823 0.0068406639 -0.0065683171 -0.0055377431 -0.0019046326 0.0018420355 0.0012462602 0.0001485776 0.0007401823 -0.0000692742 0.0018906335 -0.0002778468 -0.0008376741 0.0007127644 -0.0030510420 -0.0005092517 -0.0028874407 0.0014227473 0.0014850129 0.0014293544 0.0013394547 -0.0004231471 0.0215936504 -0.0125467836 -0.0111690392 -0.0011101688 -0.0337615719 -0.0071586199 -0.0278226988 0.0177461859 0.0142791793 0.0021508281 0.0141675683 0.0014398269 0.0078287020 0.0052668438 -0.0023141152 0.0000478468 0.0002557903 0.0002120580 0.0007149272 0.0003746404 -0.0071108592 0.0142475255 0.0101357553 0.0049346636 0.0003578256 0.0003119045 0.0004286670 0.0002643722 0.0006283528 0.0003064872 -0.0002408062 -0.0002590024 -0.0001639826 -0.0001770415 -0.0000663102 0.0001439239 0.0006516655 -0.0006331522 0.0000307839 -0.0001479679 -0.0005450727 0.0009337419 0.0001101525 0.0002300518 0.0000351120 -0.0000064904 -0.0003704548 -0.0002412652 0.0002276721 0.0003107553 0.0000786576 -0.0019436341 0.0016213368 -0.0021946596 -0.0007700297 0.0024573943 0.0001841760 -0.0031644046 0.0029733381 0.0009231683 0.0031285878 0.0014287028 -0.0037080935 -0.0014563536 0.0016162956 -0.0049483256 0.0022090645 0.0033966378 -0.0030502754 -0.0002840804 -0.0002863646 -0.0003721817 0.0002588898 -0.0001043159 -0.0004191408 -0.0004500023 -0.0015199780 -0.0008481246 -0.0004279646 0.0006416843 0.0003443948 -0.0000630867 -0.0011829668 -0.0005516767 -0.0002885820 0.0003061493 0.0005554738 0.0651536729 -0.0364461922 -0.0036258820 0.0114421454 -0.0062345807 -0.0022097519 -0.0228703286 -0.0022159220 -0.0128326374 -0.0063172409 0.0023156389 0.0001866449 -0.0116487921 0.0190793258 0.0165472834 0.0135121851 -0.0021716409 0.0040404723 -0.0545136844 -0.0024411866 -0.0327096737 -0.0483303802 0.0203034721 -0.0003779966 0.0015795889 -0.0005652994 -0.0003844845 -0.0710140465 0.0239939639 -0.0060306099 -0.0592261744 0.0748664266 0.0497250990 0.0027630375 0.0017458340 0.0020106691 -0.0062706611 -0.0023103915 0.0025866412 -0.0029148260 -0.0016982081 -0.0014336317 -0.0028745276 -0.0031481281 -0.0059562280 0.0041759528 0.0020413172 0.0009304051 -0.0118700537 -0.0026342735 0.0055907006 -0.0142196773 -0.0087251236 -0.0074422012 0.0004215186 0.0002314112 0.0002421174 -0.0194701371 -0.0103862338 -0.0027404481 -0.0031086851 -0.0030329228 -0.0100642564 0.0009141068 -0.0009672303 -0.0011205781 0.0017628262 0.0002606539 0.0011214748 0.0000801215 0.0006261332 0.0009899327 0.0009500669 -0.0000358760 -0.0006134653 -0.1731791010 0.0089237904 0.0252944180 -0.0596171884 0.0431380825 -0.0064881913 0.0216727377 0.0223954364 -0.0127254240 0.0385654418 0.0261444013 -0.0161014682 0.2192328790 0.0133173710 -0.0422812847 0.2333205275 -0.3310744862 0.0877027371 0.0201630959 -0.0301126007 0.0043066375 0.0039303016 -0.0082832005 0.0025235449 -0.1325450519 -0.0068691247 0.0555427447 0.1985827776 0.2646849906 -0.1339371480 -0.0088679336 -0.0153036681 -0.0057509871 -0.0217486498 -0.0090303115 -0.0236721609 0.0060046262 0.0080238083 0.0040944918 -0.0005233171 0.0022694945 -0.0021044993 0.0008062392 0.0063538291 -0.0029518798 0.0121997505 -0.0355397234 0.0427451854 0.0014622615 -0.0019783679 0.0033933567 0.0034315083 -0.0031561607 0.0078110597 0.0064521115 0.0000861530 0.0124139670 0.0459466867 0.0828012860 0.0056376927 -0.0000033990 -0.0001399689 -0.0002717953 -0.0011025898 -0.0009769096 0.0004111350 0.0001121148 -0.0001378754 0.0006446290 -0.0005782244 0.0003021860 0.0002015683 -0.0002899525 -0.0002489300 -0.0001497639 -0.0000569919 0.0010725945 0.0002289967 0.0000140990 0.0003421208 0.0007847265 0.0015597263 -0.0002568920 -0.0004980369 0.0055453306 0.0038561337 -0.0022458118 -0.1322261545 0.0151426699 0.0065005725 0.0034032514 0.0028932947 -0.0008069184 -0.0111888711 0.0002451036 -0.0070193319 -0.0168734736 0.0001630403 0.0025347795 0.0036243875 -0.0258205235 0.0305612777 0.0409658840 0.0036711246 0.0509714529 0.0087101257 0.0230144411 -0.0117944533 -0.0188969814 0.0117593585 -0.0277609871 0.4647813274 0.2164141981 0.4644007233 -0.0164859174 0.0046569779 -0.0229059827 0.0092500021 0.0016247476 -0.0029988207 -0.0004797469 0.0005761058 0.0019017859 0.0021569509 -0.0002752418 -0.0022451610 0.0011750594 -0.0014724491 -0.0002961295 -0.0018485499 0.0016971050 0.0024026128 -0.0007116680 -0.0017468355 0.0013213974 0.0000508531 -0.0001531412 -0.0001831014 0.0009401687 -0.0002845746 -0.0007789724 -0.0002433803 -0.0001343370 0.0002801667 -0.0000298261 0.0003585021 0.0002479804 -0.0002126347 -0.0004700955 -0.0000570913 0.0002676936 0.0003710665 0.0000181528 -0.0011213215 0.0034359311 0.0002121746 -0.0005788129 0.0006757292 -0.0004886151 -0.0000638754 -0.0017962606 -0.0003605890 -0.0001805633 0.0003447196 0.0001855651 0.0003915470 0.0000759692 0.0002238886 -0.0020461875 0.0021290258 -0.0002214903 0.0003654769 -0.0002925262 -0.0003309169 -0.0000448540 -0.0002014288 0.0000195968 -0.0005716616 0.0000891652 0.0002832195 -0.0001704058 0.0009639582 0.0001659802 0.0008433774 -0.0005119633 -0.0004481017 -0.0003395762 -0.0004132961 0.0000950872 -0.0062427034 0.0036134209 0.0030692437 0.0002482285 0.0098242062 0.0018694133 0.0082415071 -0.0053643028 -0.0042311985 -0.0005827777 -0.0046471912 -0.0005515083 -0.0021973544 -0.0014685138 0.0006460430 -0.0006522061 -0.0002270839 0.0001135963 0.0009851722 -0.0006575774 -0.0027617496 0.0690080323 0.0419854460 0.0191810462 -0.0004312432 -0.0003622669 -0.0004988982 -0.0000460721 -0.0007172681 -0.0003683997 0.0005778238 0.0004754149 0.0001008471 0.0001154797 0.0000736848 -0.0000731252 0.0000876612 -0.0001717512 0.0000671742 -0.0001614173 -0.0000161265 -0.0001130772 -0.0001121823 -0.0001060569 -0.0000154256 -0.0007383636 0.0002870739 0.0004857911 0.0006336784 -0.0002007908 -0.0003885702 -0.0017691067 0.0001090745 -0.0006870449 -0.0007677988 0.0013572513 0.0008662055 0.0004207435 -0.0001009204 0.0002593561 0.0008819191 0.0007312961 0.0005339365 -0.0001873637 0.0004517841 0.0009395319 -0.0002787054 -0.0010276483 0.0007532991 0.0001968969 0.0002371106 0.0001847882 -0.0000307109 -0.0001682441 -0.0002323507 0.0001533359 0.0004551205 0.0002845658 -0.0017798058 0.0013465907 0.0009345855 0.0000988426 -0.0024362717 -0.0014121774 -0.0014897801 0.0007523852 0.0016057052 -0.0097208350 0.0047233662 0.0018521940 -0.0015823325 0.0008550299 0.0000767065 0.0030692893 0.0004535852 0.0017976683 0.0006934540 -0.0001786208 0.0000424067 0.0014356386 -0.0027523694 -0.0024801647 -0.0017004569 0.0001668130 -0.0010546767 0.0079257115 0.0005738525 0.0039316051 0.0062993419 -0.0028557024 0.0004757256 -0.0003010872 0.0000732180 0.0000656431 0.0093511802 -0.0034892078 0.0005660006 0.0106871832 -0.0139334112 -0.0082643599 0.0065745744 0.0055579011 0.0090991066 -0.0249074710 -0.0079775534 0.0137061086 -0.0041316411 -0.0028867872 -0.0038877208 -0.0108864450 -0.0123921675 -0.0251627506 0.0139411376 0.0083026252 0.0046822172 -0.1102859625 -0.0346358386 0.0358596869 -0.0522859781 -0.0310428884 -0.0205296369 0.0016665569 0.0008025441 0.0007326314 -0.0686211940 -0.0383984669 -0.0139891814 -0.0274588004 -0.0327738202 -0.0586733166 -0.0000874856 0.0000222619 -0.0000146875 -0.0001484501 0.0000249051 -0.0000233822 0.0006963787 0.0010569937 0.0013967009 0.0011416912 0.0001349957 -0.0003788344 0.0303078525 0.0028064823 -0.0062041318 0.0086510005 0.0012487331 0.0009974202 -0.0063626247 -0.0064183464 0.0035915440 -0.0059960671 -0.0053762863 0.0030188463 -0.0859812592 -0.0009697685 0.0150558927 -0.0285065552 0.0347009250 -0.0089342448 0.0026722664 0.0026615985 -0.0009802455 -0.0034809799 0.0000314202 0.0003409143 0.0642567098 -0.0067930678 -0.0193485387 -0.0427530865 -0.0547009174 0.0302674565 -0.0406059162 -0.0365841623 -0.0311897466 -0.1136449486 -0.0289226556 -0.1392598510 0.0155472507 0.0245795935 0.0077807686 0.0020778853 0.0069322737 -0.0010513264 -0.0995514322 -0.0378465428 -0.1623147215 0.0652833568 -0.1992161781 0.2528944613 0.0128288910 -0.0204578506 0.0337558601 0.0144436491 -0.0221419022 0.0398977550 0.1830465696 0.0525132611 0.2575535661 0.1876723340 0.3252866923 0.0323416964 0.0001388842 0.0001081812 0.0002411735 0.0009316575 0.0010040911 -0.0004734045 0.0002852415 0.0005920921 -0.0005988024 0.0001870898 -0.0002653620 -0.0000705587 -0.0000341001 0.0001690695 0.0003688873 0.0010745527 -0.0007213361 -0.0008961470 0.0001665875 -0.0011618696 -0.0011779299 0.0002380505 0.0005626872 -0.0001857356 0.0021341629 0.0661014014 -0.0228096472 -0.4097920947 -0.0097614271 0.0476559573 -0.0380229043 -0.0383942553 0.0175860907 0.0238347819 -0.0383298582 0.0074570526 0.0803177337 0.1105856547 -0.0485568775 -0.0247388131 0.0942685144 -0.1122901032 -0.0127134324 -0.0355950695 0.0030653711 0.0237384742 -0.0197418793 0.0543788606 0.0195495674 0.0590194950 -0.0431924952 0.3190468293 0.0906033898 0.3572581792 0.0361585855 -0.0203683797 0.0672072343 -0.0701483565 -0.0363805205 0.0165855936 0.0049581128 -0.0058760791 -0.0039181142 -0.0043343800 0.0037431375 0.0060443438 -0.0037535858 0.0058947690 0.0019339362 -0.0033368513 0.0027850562 0.0007006084 -0.0007563145 0.0008559931 -0.0020301782 0.0007565878 0.0003528908 -0.0001146578 0.0003658696 -0.0003821707 -0.0004925951 0.0005621898 0.0000460103 -0.0005227121 -0.0004578267 0.0001028932 0.0004355987 0.0001235634 -0.0006257739 -0.0003027243 -0.0013820056 -0.0002150764 0.0010506200 0.0016327720 -0.0052158442 -0.0009843027 -0.0032333127 0.0013353825 0.0013194949 -0.0000093233 0.0022820315 0.0005284680 0.0010264061 -0.0000298611 -0.0004220515 -0.0005266375 -0.0002762020 -0.0005255570 -0.0009396258 -0.0002626263 0.0031678575 -0.0002480539 0.0009023378 0.0004622779 0.0000230120 -0.0000592310 -0.0000197851 -0.0004782562 0.0001864832 0.0001748029 -0.0001675718 0.0009306373 0.0003253554 0.0004384629 -0.0007910202 -0.0003664156 0.0001182133 -0.0003640431 -0.0000969576 -0.0018101199 0.0010768943 0.0009243725 -0.0006604440 0.0052601802 -0.0002908869 0.0062311149 -0.0046239721 -0.0029818782 -0.0000309747 -0.0038960860 -0.0005950868 -0.0014358900 -0.0009622548 0.0004607409 0.0005932171 0.0009621411 0.0004467047 -0.0027889322 -0.0092498520 -0.0099139566 -0.0757478569 -0.0647442325 -0.0354097345 0.0021497454 0.0013738080 0.0001412344 0.0010458792 0.0014668583 0.0004914023 -0.0009134777 -0.0011183545 -0.0003905092 -0.0007513280 0.0002226919 0.0006323649 0.0005502648 -0.0006727021 0.0000454434 0.0006304955 0.0013181827 -0.0014039482 0.0005451132 0.0003980504 0.0002720333 0.0002751426 -0.0005215830 -0.0003681053 -0.0001192403 0.0003548100 0.0001770761 0.0038523875 0.0016133805 -0.0010144538 0.0012580222 -0.0003968327 -0.0030311062 -0.0052032111 0.0038758704 0.0008485714 -0.0106341566 -0.0053846438 0.0094875955 0.0041767965 -0.0119394483 -0.0005471367 0.0069576802 -0.0006349577 -0.0015331001 -0.0021919523 -0.0028813028 -0.0024924009 0.0012850864 -0.0012429453 -0.0013715695 -0.0016313712 -0.0024924405 -0.0015431598 0.0003350253 0.0005221718 0.0004519625 0.0000476563 0.0008535667 0.0005551152 0.0002043313 0.0002118418 -0.0001070914 0.0795414491 -0.0503630775 0.0132312686 0.0144177193 -0.0060055175 -0.0067249444 -0.0286469216 -0.0040292062 -0.0187833979 -0.0083809343 0.0062676921 0.0040642873 -0.0171140567 0.0237323160 0.0191204293 0.0220804888 -0.0087179653 -0.0033909331 -0.0974293883 -0.0101077488 -0.0461202726 -0.0623047302 0.0198865446 0.0001426711 0.0005224831 -0.0004050270 -0.0000030637 -0.0902663906 0.0294657113 -0.0081517170 -0.0662306725 0.0738053221 0.0563704152 -0.0267241167 -0.0129016075 -0.0057439076 0.0346215786 0.0129651028 -0.0140970069 0.0169237631 0.0080635743 0.0013953407 0.0133475143 0.0171278659 0.0354774409 -0.0209680881 -0.0074256532 -0.0030602999 0.0543618938 0.0207885285 -0.0285098773 0.0890431943 0.0545810936 0.0552997031 -0.0012100225 -0.0007596980 -0.0002954130 0.0865688880 0.0460243769 0.0235284794 0.0436391283 0.0405187889 0.0901536323 0.0019571313 -0.0027191119 -0.0035496362 0.0026976059 0.0009551294 0.0024771307 -0.0001210055 -0.0030511525 -0.0051379868 -0.0063578882 0.0000810931 0.0035602253 0.0030595557 -0.0233541431 0.0089807996 0.0185731236 -0.0520711355 0.0166158151 0.0134356860 0.0056620991 -0.0047967580 0.0002022421 0.0009707987 -0.0005680385 0.1961659153 -0.0101457298 -0.0257726344 -0.0431355150 0.0836959430 -0.0242028949 -0.0343655153 0.0188333222 -0.0038451094 0.0110403916 0.0109624629 -0.0049897094 -0.3123854038 0.0577574436 0.0616134416 0.0664422873 0.0899180298 -0.0518758328 -0.0417712544 -0.0791658533 -0.0027428882 -0.0158506989 -0.0304144457 0.0043151677 0.0249186137 0.0345664406 0.0104202926 0.0002802931 0.0187948030 -0.0129785211 0.2176582717 0.1317757729 0.2657140217 0.0052078397 0.0167602419 -0.0124766036 -0.0047140119 0.0049092328 -0.0124408743 0.0020684760 -0.0021572638 0.0044009315 -0.1604629642 -0.0591600539 -0.1909199058 0.0627372492 0.1215334891 0.0008777330 -0.0006415218 -0.0007721271 -0.0001592349 -0.0021428786 -0.0021819683 0.0009372149 -0.0005574985 -0.0006186701 0.0006964621 -0.0015989608 -0.0010601238 -0.0001743477 -0.0008746658 -0.0003834023 0.0000741389 0.0009772404 0.0010074268 -0.0006662349 -0.0017008951 0.0026477579 0.0029869650 0.0004795608 -0.0002917404 -0.0003208849 0.0001646827 0.0003487304 0.0000492358 -0.0042201628 0.0001162498 0.0006145292 -0.0001188154 -0.0002870828 0.0000888302 0.0001843088 -0.0001815510 0.0000369649 0.0007950918 0.0010293592 -0.0003914439 -0.0000676656 0.0003209349 -0.0003699650 -0.0000010121 -0.0001292314 0.0000208107 0.0000485798 -0.0000466446 0.0001295378 0.0000810152 0.0001693924 -0.0001058703 0.0008748229 0.0002071996 0.0008934464 0.0006257155 -0.0003484837 0.0003305471 -0.0003606426 -0.0002865861 0.0001058148 -0.0018013026 -0.0003430434 0.0006049675 0.0024150004 0.0010267008 -0.0015362533 0.0008855381 -0.0015049217 0.0002354602 -0.1277612715 0.1229325176 0.1909890413 -0.0286757744 -0.0269196579 0.0096449031 -0.0062502873 -0.0078683685 0.0010305250 0.0578706875 0.0154726273 -0.0334276602 -0.0244608432 0.0084704500 0.0195009769 -0.0066499472 0.0108996070 0.0082612918 -0.0237335628 -0.0348620703 0.0023832984 0.0476424745 0.0209666158 -0.0262475194 -0.0387209282 0.2274782301 0.0899813192 -0.0502258953 0.0285828077 0.0387076900 -0.0163679192 -0.3203151558 -0.1005863687 -0.0061331627 0.0270518981 0.0150815273 0.0102340793 0.0623910837 0.0019415983 -0.3372124972 0.3303172220 0.3304746564 0.1063982416 -0.1173817605 -0.0759487157 0.0027166998 0.0096507148 -0.0004998415 0.0062651609 -0.0319651041 -0.0063036068 0.0057442578 -0.0781651164 -0.0109230478 -0.0096468293 0.0708441940 0.0151670482 -0.0483648310 0.0076661638 0.0211124837 -0.1654925757 0.0656124027 0.0811435922 0.0015307152 -0.1953321539 -0.0442318156 -0.2647142689 0.2438379771 0.1391821409 -0.0408026134 0.3299934740 0.0647754866 -0.0030840190 0.0094682842 0.0060920919 -0.0142942706 -0.0318677267 0.0001929886 -0.0198307235 0.0878837241 0.0303258127 -0.0002266952 -0.0002292628 -0.0002497681 -0.0005719733 0.0032987102 -0.0135215670 0.0020267490 -0.0076368523 -0.0062599259 0.0041334738 0.0033761526 0.0012557306 0.0002112348 0.0001618808 -0.0002583793 -0.0007369683 0.0002308040 0.0000133991 -0.0006836490 0.0004101586 -0.0007421480 -0.0005486847 0.0002107257 0.0007734963 -0.0060187951 0.0060537998 0.0070961013 0.0022235728 -0.0049169466 -0.0039070661 0.0018680946 -0.0005868735 0.0012264978 -0.0001998216 -0.0003879597 -0.0006097712 0.0024028154 -0.0020521938 -0.0002336879 -0.0016357086 0.0006390061 0.0094799185 0.0018511794 -0.0071120764 0.0022385881 0.0044587874 -0.0022692455 -0.0001397318 -0.0004614636 -0.0004712214 -0.0017763200 0.0013557397 -0.0029312980 -0.0038929550 -0.0000071108 -0.0009128488 0.0002534981 -0.0080636969 0.0040731970 0.0044680713 0.0017190792 -0.0055511381 -0.0039350667 -0.0075069386 0.0024720394 0.0056390342 0.0002983167 -0.0005309351 -0.0001794405 -0.0027869636 0.0007643000 -0.0009475569 0.0017479634 -0.0010284760 -0.0005132715 0.0014571378 -0.0002045752 0.0003523204 0.0002061010 0.0004150456 0.0007367745 0.0000814086 0.0003209430 0.0005612908 -0.0158986985 -0.0004668488 -0.0039760307 0.0122296307 -0.0130227610 -0.0060569307 -0.0011799829 0.0007614785 -0.0011720086 0.0071192857 0.0003992542 0.0033568340 -0.0092632746 0.0103282096 0.0058072327 -0.0000131856 -0.0000382063 -0.0000597505 0.0002343456 0.0000877400 -0.0001303101 -0.0002874089 -0.0001163723 -0.0000391526 -0.0004264219 -0.0001432767 0.0000791241 0.0002802031 0.0002407965 0.0001331380 0.0008174491 0.0005922624 -0.0003390633 0.0000737207 -0.0007997414 -0.0006031222 0.0002192727 -0.0000458309 -0.0000662537 -0.0010313172 -0.0011964840 0.0005182041 0.0022553298 0.0015341822 0.0027455925 0.0003061039 -0.0009476343 -0.0007075625 0.0012089497 0.0002982175 0.0014899000 0.0000594467 -0.0000210227 0.0000153523 -0.0000547530 0.0000285256 0.0001003643 0.0001241344 -0.0001525903 0.0000422709 -0.0000752264 -0.0003866074 0.0001637995 0.0001102647 -0.0000070979 -0.0000189861 -0.0000599204 0.0000203630 0.0000031722 0.0008203839 -0.0000619007 -0.0000350908 -0.0003011633 0.0005152171 -0.0000768523 -0.0002244139 0.0001313671 -0.0000298269 0.0001193738 0.0000561864 -0.0000339875 -0.0020100122 0.0004062920 0.0004721099 0.0007058670 0.0008861871 -0.0004535858 -0.0001499280 -0.0001759925 -0.0000978506 -0.0000453941 -0.0000775507 -0.0000075080 0.0000402092 0.0000915560 -0.0000108400 0.0000220929 0.0000679568 -0.0000126064 0.0005056947 0.0003072318 0.0005551895 0.0000865575 -0.0001113075 0.0002164156 -0.0000082737 -0.0000043761 -0.0000002298 0.0000019979 -0.0000104410 0.0000136294 -0.0002305593 -0.0001529181 -0.0003481396 0.0001373432 0.0002065082 -0.0000012808 -0.0000364150 -0.0033835470 0.0050278585 0.0081780093 0.0189321298 -0.0121721606 -0.0013247157 -0.0008814614 -0.0050176083 -0.0171615953 -0.0042846251 0.0071186603 0.0008928917 -0.0009663100 0.0060360728 0.0146802227 -0.0018852994 -0.0044268478 -0.0131765578 -0.0008252554 -0.0092676012 -0.0148440804 0.0137328501 -0.0098712231 0.0089339567 -0.0667357805 0.0221306335 0.2205409586 -0.0034296037 -0.0228476955 0.0532063955 0.0093451371 -0.0084167292 -0.0149201331 0.0258187521 -0.0187327335 -0.0588831029 -0.0558130423 0.0266840630 -0.0138267148 0.0197707680 -0.0336880969 -0.0058042448 -0.0085954165 0.0069674722 0.0389886006 0.0262928373 0.0318037887 0.0206123872 0.0412508327 -0.0214772009 0.1308030815 0.0626178902 0.1269986104 0.0205854306 -0.0122487824 0.0260065031 0.0521718215 0.0299210040 -0.0090703384 0.0007953998 -0.0001220324 0.0051103862 -0.0056261703 -0.0039493816 0.0020182075 -0.0047782357 0.0038738964 -0.0149665034 0.0058232191 -0.0037928225 -0.0016375415 0.0041561008 0.0055763615 -0.0019739823 -0.0009049401 0.0002517621 0.0007015719 -0.0010385226 0.0002366727 0.0009002974 -0.0005393512 0.0003527415 0.0001909395 0.0001754133 -0.0004804864 -0.0002406566 0.0003278764 0.0009565098 0.0001715956 0.0006896562 -0.0027343105 -0.0015763798 0.0005105765 0.0046803629 0.0043221696 -0.0007052324 -0.0000952163 0.0004811522 0.0003366318 -0.0023236640 -0.0012412768 0.0001603191 0.0000222895 -0.0003154563 -0.0010013907 0.0002976059 0.0003268447 -0.0004309302 -0.0003414086 0.0023927472 0.0003242701 -0.0009568499 -0.0002245167 -0.0000524136 -0.0000161385 0.0000296786 0.0003196984 -0.0001670432 -0.0001870101 -0.0000047235 -0.0002666024 -0.0002327247 -0.0000473831 0.0003686306 0.0001170950 -0.0001802620 0.0002321071 0.0000907444 0.0005498351 -0.0003272904 0.0000221090 0.0008038866 -0.0008548739 0.0015349630 -0.0024064732 0.0019205288 0.0010025716 -0.0000914507 0.0019433701 0.0003922556 0.0007383646 0.0004712302 -0.0002436723 0.0018519003 0.0003638878 -0.0007998569 -0.0010752830 0.0089794077 0.0210229786 -0.0552796764 -0.0414953052 -0.0214024080 0.0010213891 0.0009688864 0.0008672288 -0.0021529675 0.0002255971 0.0008626035 -0.0009992471 -0.0004726177 0.0000768798 0.0011637275 -0.0004812056 -0.0006542846 -0.0035646091 0.0048302089 -0.0011476290 -0.0001123134 -0.0010980075 0.0015331228 -0.0005246002 -0.0002630713 -0.0002187270 0.0020412587 -0.0005714162 -0.0012852448 -0.0011771874 0.0005619255 0.0009638685 0.0082967346 -0.0140750258 0.0154581248 0.0044415610 -0.0162865143 0.0028392793 0.0192711592 -0.0181075274 -0.0072782313 0.0072931413 0.0025979434 -0.0125357867 -0.0031969206 0.0105995459 0.0020254229 -0.0094264283 0.0024521531 0.0011768500 0.0020073030 0.0027438818 0.0022095488 -0.0013168346 0.0013080626 0.0025594293 0.0024048294 0.0029085601 0.0018684079 0.0035863494 -0.0036298275 -0.0029714773 -0.0006252804 0.0033585536 0.0017686451 0.0032414064 -0.0017146544 -0.0032778849 -0.0776551999 0.0477360033 -0.0098967471 -0.0158791020 0.0055229621 0.0040534459 0.0276347330 0.0037102769 0.0179382239 0.0082907463 -0.0064103519 -0.0042650542 0.0147925590 -0.0225102904 -0.0186947590 -0.0217337024 0.0101493494 0.0042677764 0.0854213412 0.0058059971 0.0440880603 0.0602170769 -0.0194996069 -0.0002542785 -0.0006593146 0.0004472265 0.0001104338 0.0928081780 -0.0282122471 0.0104238508 0.0695647541 -0.0769729649 -0.0562289060 -0.0163659010 -0.0088320259 -0.0045509301 0.0220694739 0.0075830148 -0.0111542879 0.0107836649 0.0056629110 0.0025244160 0.0092220977 0.0113704221 0.0236810171 -0.0149501737 -0.0069130391 -0.0059604248 0.0487055904 0.0228877510 -0.0237559445 0.0589995428 0.0363674503 0.0359482684 -0.0010270038 -0.0005822294 -0.0005462347 0.0601347327 0.0328100432 0.0148789349 0.0287853703 0.0273411028 0.0576300775 -0.0018619924 0.0023739522 0.0030266201 -0.0023412774 -0.0007317803 -0.0020147513 -0.0002943712 -0.0018127319 -0.0028751510 -0.0035436164 -0.0000492173 0.0019288151 0.0015891604 0.0512194404 -0.0204408380 -0.0521247095 0.0739849192 -0.0201722391 -0.0108038835 -0.0218018962 0.0104673301 -0.0027821602 -0.0030949885 0.0014166180 -0.3315303158 0.0043467565 0.0506014559 0.0462020999 -0.0974466553 0.0296853668 0.0443498589 -0.0288259407 0.0057716650 -0.0134140862 -0.0166760378 0.0070847815 0.4380236369 -0.0873139660 -0.0931709436 -0.0387669956 -0.0527662964 0.0374407614 -0.0635717985 -0.1082797116 -0.0106105566 -0.0187641136 -0.0623628419 0.0280344221 0.0296030673 0.0454748222 0.0103457966 -0.0015075638 0.0226699884 -0.0183506177 0.2878881355 0.1803541581 0.3608288134 0.0157176791 -0.0172177155 0.0273081213 0.0005117948 0.0246533118 -0.0210473745 0.0026226613 0.0013946364 0.0030379553 -0.2472161251 -0.0759529373 -0.3099392116 0.0567185434 0.1114190504 -0.0011559180 -0.0003896243 -0.0000477132 -0.0001580750 -0.0011730496 -0.0013343397 0.0008810370 -0.0011160149 -0.0016885419 0.0008220669 -0.0006227811 -0.0001408024 -0.0001485773 0.0009974397 0.0000947449 -0.0010172401 -0.0053954799 -0.0016442484 0.0027314134 -0.0011552912 0.0022901121 0.0004485081 -0.0026134463 -0.0022508878 0.0029298367 0.0004767868 -0.0011308279 0.0003199250 -0.0013637025 -0.0022947284 0.0013061069 0.0027573842 -0.0026107497 0.0006358086 0.0006438763 -0.0018103756 0.0010852839 0.0020828668 0.0023526708 -0.0014290556 -0.0029498592 0.0042738884 -0.0079983964 -0.0023958290 -0.0028058075 -0.0006547377 -0.0036158337 -0.0052956313 0.0001121003 -0.0011614308 -0.0004910866 -0.0009686654 0.0116290618 0.0001838743 0.0155891118 0.0000883587 -0.0002980822 0.0034845366 -0.0026833380 -0.0023223509 -0.0006003756 0.0093088193 0.0046619846 -0.0057124950 -0.0144046307 -0.0078673650 0.0090949954 -0.0030862184 -0.0011461769 0.0018870326 0.0850185537 -0.0277637176 -0.0650697011 0.0424993106 0.0495253304 -0.0054131045 -0.0158334253 0.0007573035 0.0092579875 -0.0137896535 -0.0039793835 0.0060995052 -0.0033198566 0.0064171881 0.0047626222 0.0080396770 -0.0019952103 -0.0058107620 0.0056283743 0.0085677891 0.0010378284 0.0071615439 -0.0327808327 -0.0159916158 -0.0061249358 0.0468571919 0.0198403885 -0.0338205771 0.0153486965 0.0280595643 0.0025782483 -0.0413773333 -0.0277283613 0.0330035363 0.0116056248 -0.0145168614 -0.0475179679 -0.0032038981 -0.0032078815 -0.1162059005 0.0372687945 0.1697940133 0.0097844999 -0.0128075405 -0.0008863162 0.0016099905 -0.0017009398 -0.0012346589 -0.0023393662 -0.0015694221 -0.0005946227 -0.0017057166 0.0049857816 -0.0008373285 0.0010659316 0.0004612564 -0.0010249504 -0.0026620869 -0.0029327583 -0.0002251504 -0.0244602675 0.0118206229 0.0157016915 0.0060714850 0.0458988752 0.0211758944 0.0266359867 -0.0155523539 -0.0117616047 -0.0011011954 -0.0014383769 0.0057626331 0.0068959389 0.0006214370 0.0000671558 0.0089493709 0.0132304006 0.0016900515 -0.0058008858 0.0294522277 -0.0064878595 0.0022302416 0.0016596221 0.0020545904 0.2183508516 0.1872232190 0.0628374780 -0.0495555134 0.1002655174 0.0794316346 -0.1265755308 -0.1047613212 -0.0239954149 0.0102495161 0.0051353636 0.0028009941 0.0156600402 -0.0146739383 0.0032741953 0.0076804238 0.0077422434 -0.0148702868 0.0064367283 -0.0003786769 -0.0029174952 0.1294336101 -0.0637206312 -0.0973143438 -0.0645148964 0.0524531001 0.0637682901 -0.0519968732 0.0427175825 -0.0526802583 -0.0151731906 0.0573489622 0.0015924531 -0.0666778914 0.0552499719 0.0146567619 -0.0300818200 -0.0127507826 0.0606293358 0.0192644157 -0.0128183057 0.0329124623 -0.0198981221 -0.0402634378 0.0337807380 0.0031089014 -0.0036768187 -0.0042669606 -0.0075017927 0.0234978358 0.0260933275 0.0007518179 -0.0042491015 -0.0057577028 0.1992265518 -0.1429632041 -0.1124246294 -0.0340236051 0.2096329651 0.1112020528 0.1788456335 -0.0552843388 -0.1663594801 -0.0022713803 0.0006679488 -0.0006532790 0.0007912305 0.0000090945 0.0006026432 -0.0002810909 0.0008083192 0.0011170316 0.0001309427 -0.0006115134 -0.0007212612 0.0010350248 -0.0006247868 -0.0006341618 -0.0010583960 0.0008854421 0.0000459690 0.0051564073 0.0006982445 0.0012563949 -0.0003770426 0.0037656316 -0.0002524570 -0.0003388226 -0.0008033741 -0.0011503017 0.0018312988 -0.0025308328 0.0013976621 0.0017845723 -0.0040940319 -0.0007504929 0.0014034658 0.0007914638 0.0013321677 -0.0026518830 -0.0011210239 -0.0007317656 -0.0004811531 -0.0011032982 -0.0026938006 0.0003685818 0.0001173486 -0.0006940935 0.0011000856 0.0007916779 0.0012221850 0.0120544735 0.0056031560 -0.0009180470 0.0005182097 -0.0056572605 0.0024041120 -0.0004937723 -0.0008679019 -0.0007241549 -0.0118341200 -0.0075232851 0.0029357821 -0.0052454424 -0.0040994027 -0.0075997224 -0.0003033576 0.0006310763 0.0005038131 0.0003418776 0.0000775948 0.0004278465 -0.0000341785 0.0014604441 0.0018367688 0.0005642517 -0.0000488961 -0.0005521647 -0.0004405151 0.0043088914 -0.0016630615 -0.0036035578 0.0050518967 -0.0014005636 -0.0000692825 -0.0020403720 0.0008035014 0.0000630284 0.0000001752 -0.0000306854 -0.0206515261 -0.0004284938 0.0034829209 0.0021135826 -0.0040202586 0.0011992505 0.0023360317 -0.0019928401 0.0005143988 -0.0010195343 -0.0011275452 0.0005166168 0.0232796046 -0.0049231698 -0.0041709081 0.0006446693 0.0012823033 0.0000294649 0.0066233849 0.0078336178 0.0041462124 0.0013828752 0.0049477120 -0.0024818052 -0.0013380885 -0.0029559701 0.0003119246 -0.0004247875 -0.0026038581 0.0011515391 -0.0206441573 -0.0123079400 -0.0243508062 -0.0044413438 0.0090630566 -0.0126914861 -0.0010588997 -0.0024769996 0.0005066603 -0.0000644499 -0.0000197330 -0.0001550970 0.0185388595 0.0055105529 0.0237867131 -0.0018082230 -0.0029874809 0.0001704703 -0.0504180690 -0.0635093921 -0.0241513720 -0.2963917747 -0.2094722689 0.0959844670 -0.1117997708 -0.1975451825 0.1102145856 -0.2066193136 -0.0440894148 0.0284079175 -0.0668093096 -0.0646143759 -0.0330342700 -0.0933683006 0.2700328017 0.1172292685 -0.1224513941 0.1734183198 0.2146045707 0.2246748428 -0.0487695708 -0.1037174582 -0.0005981015 0.0004523959 0.0000259587 0.0035488141 0.0021649777 -0.0007763269 -0.0020038851 0.0023141042 -0.0007203117 -0.0010431836 0.0012270830 -0.0006334673 -0.0018769406 -0.0020775357 0.0009852025 0.0006065085 -0.0010477291 0.0017173859 0.0008369193 0.0014839893 -0.0003832622 0.0007311271 0.0017168970 -0.0003855608 -0.0000978191 -0.0007315228 0.0005374367 0.0011538726 0.0018022807 -0.0004741467 -0.0012137843 0.0005831461 -0.0012637056 0.0005844794 0.0000263602 -0.0006863293 0.0039830157 0.0019952927 -0.0019645556 -0.0070402053 -0.0034430632 0.0044390647 -0.0014863643 -0.0008879931 0.0001223181 0.0378375688 -0.0205956605 -0.0349359701 0.0384566987 0.0390759856 -0.0086043673 -0.0106961729 -0.0025301227 0.0052603307 -0.0057179826 0.0019025189 0.0023356971 -0.0054477240 0.0031273517 0.0049596108 0.0037858298 -0.0025082755 -0.0026831003 -0.0013058636 0.0086697850 0.0041176217 0.0143052705 -0.0169312520 -0.0159492410 -0.0096099016 0.0609983934 0.0243581783 -0.0006157213 -0.0006927244 -0.0010850254 -0.0011217608 -0.0517992797 -0.0215977260 0.0100097042 0.0017065527 -0.0035049395 -0.0196215283 0.0121815941 -0.0058285239 0.0282880018 -0.0369175715 0.1357115303 0.0084718441 -0.0134204845 -0.0002736313 -0.0004773580 -0.0023857596 -0.0004286620 0.0022631854 -0.0026990054 -0.0039150585 -0.0008625470 0.0025078246 0.0003535010 0.0014793653 0.0021153485 -0.0010999090 -0.0034166209 0.0008482312 0.0010887941 -0.0142201655 0.0084749189 0.0253406894 0.0010516487 0.0175484317 0.0067739938 0.0032797043 0.0017642600 0.0002519181 -0.0025173619 0.0116017347 0.0055803946 0.0111321388 0.0037032717 -0.0007863252 0.0038836849 0.0027775541 0.0012144862 -0.0048553435 0.0499925736 -0.0017264432 -0.0000053102 0.0004935402 0.0010885431 -0.3719896837 0.0283572417 0.1524187012 -0.0547545073 0.0613658788 0.0606976507 -0.0119714335 -0.0078255871 0.0013482102 0.0006369326 0.0033607577 0.0042579927 0.0003712697 -0.0016944217 -0.0016123650 0.0021191481 0.0029537974 -0.0135562848 0.0003077815 -0.0067940749 -0.0072273414 0.1067323185 -0.1169087317 -0.1242945895 -0.0359561296 0.0869850106 0.0726648688 -0.0002520272 -0.0103951869 0.0059807769 -0.0013284257 0.0051636405 -0.0043498254 -0.0042460515 -0.0001100453 -0.0029021322 -0.0070263194 0.0019094657 0.0463886037 0.0098444899 0.0007361876 0.0509715717 -0.0182463373 -0.0319332333 0.0225364978 0.0155814809 0.0136349507 0.0115646113 -0.0166271929 0.0228033513 0.0306234485 0.0135644275 0.0175643095 0.0075332142 0.1297788840 -0.0851354839 -0.0962183353 -0.0431432200 0.0927827953 0.0400086563 0.1348141624 -0.0263665438 -0.0939103705 0.0013012698 -0.0011966058 -0.0006514187 0.0004695494 -0.0000335474 0.0000908791 -0.0006320904 0.0001306472 0.0000206949 -0.0001868229 -0.0001612812 -0.0001707160 0.0002454752 0.0004473307 0.0004362019 0.0001980552 0.0001946840 0.0001756477 -0.0004666481 -0.0001823467 -0.0002453995 -0.0004759178 0.0014316180 -0.0009257880 0.0004855718 -0.0005432757 -0.0008145789 -0.0023256365 -0.0001638757 0.0001650475 -0.0025065355 0.0023426568 0.0021585764 0.0008609101 0.0005383798 -0.0001005635 -0.0011529743 0.0001538529 -0.0000759314 -0.0006015576 -0.0002273679 0.0003549180 0.0005030673 0.0001161662 -0.0007672393 0.0001640490 -0.0000824474 -0.0002786645 0.0006088205 -0.0007080964 0.0004768437 -0.0002931225 0.0028555681 0.0015619813 -0.0011043522 -0.0003874389 0.0002664481 0.0011656265 -0.0007095082 -0.0006102536 -0.0014662027 -0.0014147119 -0.0026123718 -0.0002097181 0.0007042622 0.0008657469 -0.0001893422 -0.0001935107 -0.0002752777 -0.0001024993 0.0005140066 0.0006294656 0.0010108917 0.0002957302 -0.0007538018 0.0006200739 -0.0032486886 0.0012009996 0.0036669269 -0.0035467426 0.0008601303 -0.0001163896 0.0013249294 -0.0005256239 -0.0001361012 -0.0000515411 0.0000454309 0.0145277260 0.0002631509 -0.0022063150 -0.0014333754 0.0025346463 -0.0006377337 -0.0013231927 0.0015328053 -0.0004830451 0.0004710092 0.0010989913 -0.0004442409 -0.0178998185 0.0039329356 0.0033137305 -0.0023198781 -0.0028024155 0.0011576053 -0.0011421853 -0.0023025450 0.0000960387 -0.0010577459 -0.0018891990 0.0001112903 0.0005564422 0.0010393335 -0.0000487269 -0.0001430987 0.0003478861 -0.0005020559 0.0045559240 0.0031654367 0.0053325700 0.0003076867 -0.0011802275 0.0015463446 0.0000948855 0.0005562993 -0.0003628547 0.0001841054 -0.0001169476 0.0003546447 -0.0028699716 -0.0006061366 -0.0037159960 0.0008678421 0.0015101963 0.0004095736 0.1112428452 -0.0019264598 -0.0544115885 -0.0916804236 0.0552111311 -0.0724597671 0.3020483709 0.3435630720 0.0728553805 0.0084738358 0.2472307555 0.1431616748 0.1143830057 -0.0340481821 -0.0441350715 0.2247821663 -0.1338934037 -0.1491529205 0.2873308615 -0.1960364150 -0.0750870237 0.2776321210 -0.0886492376 -0.0268640689 0.0221327257 -0.0078212105 -0.0009475876 -0.1873989967 -0.0640040265 0.0424751551 0.0637650400 -0.0792146627 0.0230908539 0.0451637325 -0.0461690442 0.0226156918 0.0728379411 0.0910648966 -0.0441332380 -0.0379266530 0.0676003316 -0.1118576243 -0.0417168581 -0.0581006755 0.0007886501 -0.0424948606 -0.0799458191 0.0149437537 -0.0052406394 0.0176540701 -0.0236552935 0.1080891371 -0.0281257765 0.1714746333 0.0311086843 -0.0153035599 0.0596807192 -0.0503746074 -0.0233606362 0.0147071966 0.0049099727 -0.0066911378 -0.0044451690 -0.0049089862 0.0024020631 0.0056887768 -0.0035818607 0.0048904114 0.0010570973 -0.0040189833 0.0020780486 0.0025966268 -0.0010697552 -0.0010315998 -0.0002957186 0.0007314664 0.0001444911 -0.0003194625 0.0004216130 0.0000395954 -0.0002675056 0.0003334419 -0.0001017158 -0.0003406802 -0.0004611665 0.0000111110 0.0004088345 -0.0001448748 -0.0004567051 -0.0001200389 -0.0008517066 0.0004588307 0.0007299629 0.0010506537 -0.0026452762 -0.0002387391 -0.0005567445 0.0001288645 -0.0005665642 -0.0000378817 0.0018713540 0.0010116075 -0.0005368747 -0.0004659872 0.0001837386 0.0012471412 0.0002074446 -0.0002079866 0.0038198925 -0.0017211934 -0.0013128769 -0.0001951145 0.0005255984 0.0001371421 0.0000005401 0.0000561541 0.0000215018 -0.0000096028 -0.0000039353 -0.0000061828 -0.0001359759 0.0001505826 0.0001705819 0.0001623326 -0.0002385354 -0.0001064637 -0.0000185397 0.0000379610 0.0000466992 0.0003641868 -0.0001990418 0.0000316371 -0.0003661709 0.0000179308 -0.0005493588 0.0009614326 -0.0008324338 -0.0006390036 -0.0001477970 -0.0004866984 -0.0003166895 -0.0006667873 -0.0002964300 0.0000710542 0.0006414745 0.0001303145 0.0000813424 -0.0027369614 -0.0033516098 -0.0020608130 0.0088897899 -0.0041118200 -0.0103837167 -0.0153622971 -0.0082540572 -0.0005456210 0.0026664009 -0.0028147637 -0.0027543413 0.0054482808 0.0042893156 0.0009220879 -0.0009606629 -0.0005561403 0.0012681069 -0.0028875802 0.0033783501 -0.0014087466 0.0011365901 0.0053211723 -0.0088554212 0.0000655018 0.0005447122 0.0003014676 -0.0046310589 0.0010450071 0.0027169577 0.0025132171 -0.0010811403 -0.0019173060 0.0153581366 -0.0105955458 0.0121692367 0.0053395743 -0.0166019450 -0.0002548110 0.0115061730 -0.0078309487 -0.0024297189 -0.0251992674 -0.0092705332 0.0378304425 0.0144303129 -0.0273832078 0.0297908947 0.0006549979 -0.0236229255 0.0158891910 -0.0026544031 -0.0026958253 -0.0022086665 0.0019847844 -0.0033087553 -0.0025896243 -0.0010798526 -0.0022630759 -0.0012421641 -0.0076813119 0.0058839346 0.0041818882 0.0011384581 -0.0075828680 -0.0042478556 -0.0066428690 0.0025244894 0.0066885025 -0.0324612895 0.0171326462 0.0034167508 -0.0087617645 0.0020906327 -0.0007614216 0.0101966206 0.0011980527 0.0058958062 0.0039641258 -0.0018232981 -0.0006991846 0.0022206282 -0.0077673864 -0.0078581133 -0.0071497057 0.0031835087 0.0000263344 0.0265825070 0.0025330770 0.0130692104 0.0232087469 -0.0094037708 -0.0006699885 -0.0014695326 0.0006045197 0.0002173738 0.0396017547 -0.0097197692 0.0057378911 0.0332613095 -0.0391247086 -0.0248783494 -0.0067960793 -0.0012275318 0.0047700237 0.0026205101 0.0025704975 0.0042740772 0.0007727741 -0.0011169996 -0.0054030724 -0.0031954347 -0.0007019872 0.0017617886 0.0019478098 0.0032861946 0.0066203035 -0.0166388351 -0.0101349188 0.0088466238 -0.0029087908 -0.0013604753 -0.0030726964 0.0012813935 0.0004268024 0.0006325969 -0.0004114036 -0.0013889286 0.0017253959 0.0119721491 0.0134347202 0.0204080964 -0.0002899482 0.0000377461 -0.0000156995 -0.0002201386 0.0000984061 0.0001077882 0.0003279521 -0.0002121526 -0.0005476870 -0.0015359997 0.0000081377 0.0007759891 -0.0282566796 0.0972214599 -0.0344107726 -0.1106884489 0.1010267255 -0.0231218925 0.0069477020 -0.0410767114 0.0152826293 0.0033844711 0.0044998974 -0.0025322653 -0.4146646185 -0.0089960917 0.0672489837 0.0513328645 -0.0878928713 0.0247673087 0.0429040800 -0.0431442615 0.0123403754 -0.0171147531 -0.0329396729 0.0137814140 0.4951620659 -0.1078394595 -0.0895132726 0.0731557082 0.0941654869 -0.0368672500 0.0719400690 0.1003855973 0.0310060139 0.0326984514 0.0750721285 -0.0200846807 -0.0196398274 -0.0396283465 0.0038426816 -0.0001440673 -0.0270211381 0.0193928870 -0.2331207063 -0.1485057637 -0.2781708513 -0.0410964134 0.0984769185 -0.1339712067 -0.0111987526 -0.0302412625 0.0098629806 -0.0045779775 0.0016056377 -0.0085231471 0.1947524254 0.0513273219 0.2486880750 -0.0281719383 -0.0468777911 -0.0070762163 0.0038011556 0.0026478246 0.0002024918 0.0123663113 0.0099112202 -0.0053914064 0.0101424365 0.0152092338 -0.0036556663 0.0097256716 0.0056975736 0.0008081671 0.0041082065 0.0025409185 0.0010010610 0.0100157906 -0.0136203228 -0.0094275404 0.0117136249 -0.0118626002 -0.0093983302 -0.0045310130 0.0010037550 0.0040031427 -0.0196342501 0.0089508647 -0.0003010619 0.2669323367 -0.0016557974 -0.0280236643 -0.0348631825 0.0226793980 -0.0046592500 -0.0547788444 0.0096746425 0.0035143662 -0.0492033809 -0.0569320928 0.0270901949 -0.0272364038 0.0497997370 -0.0729929934 -0.0342688850 -0.0275399065 -0.0346038995 -0.0255958506 -0.0340561176 -0.0047853443 -0.0118491854 0.0018087636 -0.0162003028 0.1827009065 0.0441548628 0.2097605968 0.0331870420 -0.0164045441 0.0410313940 0.0425870728 0.0233108473 -0.0071656894 -0.0250797207 -0.0264852390 0.0568461226 0.0520766809 0.0299704499 -0.0442160511 -0.0110322856 0.0205254395 -0.0641567484 -0.0002833366 -0.0003685863 0.0025289301 0.0000771490 -0.0024897879 0.0008811308 0.0004440211 -0.0008140998 -0.0007508819 0.0017049906 0.0004879275 -0.0011396001 -0.0003770184 -0.0005822866 -0.0001390464 0.0001366692 0.0005570770 0.0000474798 -0.0010350647 -0.0003864961 0.0004636796 0.0025457654 0.0061825611 0.0018276371 -0.0002253677 -0.0078718966 -0.0032888139 0.0034585044 -0.0008872502 -0.0018393554 -0.0009488380 -0.0035432268 -0.0003696045 -0.0010111566 0.0004527635 0.0008965297 0.0007328906 0.0002481637 -0.0002909473 0.0020691991 -0.0002974156 -0.0056905877 0.0003867656 0.0000166097 -0.0001930968 -0.0004522584 -0.0002935959 0.0001324143 -0.0002140656 -0.0003014884 0.0000228428 0.0004418950 0.0008742220 -0.0001585580 0.0003603952 -0.0004751891 -0.0001963619 0.0000515552 0.0001855505 -0.0000552321 -0.0047521184 0.0025184786 0.0024963605 0.0002970839 0.0003456980 0.0011732370 0.0015224843 -0.0013146689 -0.0011548354 0.0001467218 -0.0015389073 0.0002045506 -0.0000740819 -0.0001010572 0.0000401080 -0.0053206989 -0.0031856735 -0.0011156896 0.0186120346 -0.0079648902 0.0120605875 0.0139492289 0.0066516810 -0.0008234633 0.0035535889 0.0134869915 0.0072847247 -0.0111567515 0.0021091846 0.0056668910 -0.0077269655 -0.0042330098 -0.0005713510 0.0083069460 -0.0078428693 -0.0082953013 -0.0536040512 0.0687222392 -0.0208206659 -0.0066274954 -0.0271148726 0.0629119400 -0.0020505731 0.0451475961 0.0450436026 0.0127538495 -0.0061675741 -0.0096244891 -0.0060440456 0.0053450210 0.0060493217 0.1918573107 -0.2091691884 0.2265451252 0.0812260190 -0.2877494373 0.0451289423 0.2710569157 -0.2002121398 -0.0614174473 0.0902896893 0.0144914674 -0.2649088052 -0.0727358146 0.0979591322 -0.2246086475 0.0368186851 0.1939268108 -0.1381727381 -0.0706290470 -0.0848017922 -0.1822943100 0.0911693475 -0.1242352011 -0.1610127747 -0.0160348574 -0.2040779825 -0.0740622655 0.0188689684 -0.0145167334 -0.0120548798 -0.0034490734 0.0169699984 0.0099821366 0.0168157626 -0.0079618593 -0.0158692879 0.0232729718 -0.0138879185 -0.0000474607 0.0051747326 -0.0018984802 0.0007046522 -0.0079684214 0.0000443419 -0.0040465598 -0.0007793320 0.0026256169 0.0023785746 -0.0006626667 0.0046717793 0.0055471505 0.0051378934 -0.0038259564 -0.0021728843 -0.0156263518 0.0037614797 -0.0148996330 -0.0120420321 -0.0017188398 -0.0007628930 0.0004131342 -0.0005928167 0.0005970006 -0.0396534344 0.0072335832 -0.0100782057 -0.0314204779 0.0322222569 0.0202272421 -0.0010739197 -0.0002034663 0.0033902407 -0.0014822478 0.0006378271 0.0042532641 -0.0003961322 -0.0011254830 -0.0042487215 -0.0028545432 -0.0020644814 -0.0031053776 0.0041778529 0.0030425586 0.0051743935 -0.0234788495 -0.0004252615 0.0060184815 -0.0063099512 -0.0038342038 -0.0017531111 -0.0001058625 -0.0003879853 -0.0001463518 -0.0123574184 -0.0074575747 -0.0009725373 -0.0051048852 -0.0015823721 -0.0075344264 0.0005782046 -0.0006261556 -0.0008456697 0.0000631649 0.0001261620 -0.0000405644 0.0001434713 0.0008259065 0.0012190673 0.0003543087 -0.0001056324 -0.0005163985 0.0228608068 -0.0081754087 -0.0007984400 0.0705972525 0.0018758746 -0.0126637268 -0.0182395530 0.0033527669 0.0018499257 0.0042123943 -0.0086913558 0.0027049304 0.0590928035 -0.0023997236 -0.0082430395 -0.0164403870 0.0294014796 -0.0083355769 -0.0014664394 0.0013068780 0.0005747137 -0.0039305561 0.0198116597 -0.0064235982 -0.0677847453 0.0095875596 0.0105694263 -0.0927995666 -0.1054470371 0.0524526527 0.0436756743 0.0182851200 0.0541302196 0.0143754692 0.0170850997 0.0075895224 0.0008346411 -0.0036751593 0.0037605113 -0.0063759170 -0.0202904813 0.0050263806 -0.0575595304 -0.0322638303 -0.0695623712 -0.0407920910 0.0899900270 -0.1304236470 -0.0113333673 -0.0080549737 -0.0109519090 0.0023732081 0.0061004212 -0.0013651294 0.0497161815 0.0165950387 0.0617455912 -0.0087651467 -0.0151583297 -0.0008446743 0.0000735387 -0.0030358472 -0.0019577165 -0.0213967547 -0.0091899001 0.0039207448 -0.0023117189 -0.0083915569 0.0058391812 -0.0134437537 0.0020063804 0.0047407384 0.0026033929 -0.0053477875 -0.0049276226 -0.0045994613 0.0144711610 0.0074278254 -0.0041181495 0.0166354852 0.0169843622 -0.0085302209 -0.0107788515 0.0053359134 -0.0126801405 0.0005287817 0.0019102794 0.2058351177 0.0013924587 -0.0230091025 -0.0255207749 0.0200742107 -0.0046068490 -0.0430555821 0.0108619376 0.0014920832 -0.0363529858 -0.0458977807 0.0202954591 -0.0184184517 0.0375913794 -0.0547809320 -0.0284213792 -0.0177352529 -0.0321934100 -0.0203830335 -0.0230359588 -0.0067591576 -0.0107289050 -0.0020931615 -0.0110851160 0.1547165209 0.0408405711 0.1692957109 0.0231719769 -0.0113220690 0.0324844118 0.0317753286 0.0180307278 -0.0044748984 0.0062616110 0.0021335817 -0.0020031209 -0.0123676038 -0.0067256751 0.0078890423 -0.0045322642 0.0010151214 -0.0055935699 0.0462578537 -0.0500198322 -0.0556794253 0.0661096096 0.0630051424 -0.0162584727 -0.0188971247 -0.0083002256 0.0081480952 -0.0196047933 0.0182375070 0.0208264195 -0.0033724885 0.0040735662 0.0042701729 0.0048241063 -0.0123339169 -0.0072404479 -0.0017798727 0.0267675559 0.0116797892 0.0252883749 -0.0190074709 -0.0262942181 -0.0086085132 0.0873412348 0.0325609832 0.0394283394 -0.0273652107 -0.0334739038 -0.0026901123 -0.0958569680 -0.0384907502 -0.0039122282 -0.0127948422 -0.0024420478 -0.0018361536 0.0016732402 0.0010234801 0.0248834393 -0.0184281556 -0.0203053896 0.0014921860 -0.0010086861 -0.0000344344 0.0000861929 -0.0010312161 -0.0001128312 0.0004840951 -0.0002435715 -0.0003574027 -0.0009480031 0.0030357067 0.0007677587 -0.0006736564 -0.0004808301 0.0002571606 -0.0004255336 0.0000594700 0.0002031314 -0.0050589713 0.0034017107 0.0034438851 -0.0003351263 0.0030299362 0.0020056023 0.0097292302 -0.0075300519 -0.0054194612 -0.0003811989 0.0024457636 0.0003309814 0.0044521336 0.0015976472 -0.0017432323 0.0061587977 -0.0006939875 0.0007185262 -0.0058151332 0.1096221605 0.0084873088 0.0130531639 0.0077261783 0.0036889025 0.0063177831 -0.0120471465 -0.0086158761 0.0016570777 -0.0044233887 -0.0041433587 0.0048557680 0.0040142089 0.0005847721 -0.0010894595 0.0064478926 0.0111834886 0.0032106770 -0.0046456893 -0.0017411432 0.0035869729 0.0136377451 -0.0361939292 -0.0016111518 -0.0910130485 -0.0947731649 -0.0083984075 0.0067141156 0.0081466378 0.0037626553 -0.0046304965 -0.0042134821 -0.0100490985 0.0025002598 -0.0084911649 -0.0080743165 0.0127633311 0.0098443038 -0.0044233816 0.0102547438 0.0055983615 -0.0342467948 -0.0009785032 0.1237937966 0.0352545432 -0.0320020292 0.1374764751 -0.0404743302 -0.1039695245 0.0772215575 0.1609838460 0.2031264011 0.4016147710 -0.1978963539 0.2642913733 0.3633578946 0.0613255070 0.4398321335 0.1662844808 -0.0099656922 0.0052509742 0.0045646518 -0.0002035605 -0.0194303767 -0.0118599457 -0.0079041951 0.0033046739 0.0068978630 0.0140162768 -0.0074872715 -0.0008403189 0.0028405389 -0.0004542927 -0.0010155636 -0.0027882109 -0.0016963785 -0.0030665206 -0.0021691874 0.0004618796 0.0001321161 -0.0015299955 0.0039394712 0.0035603117 0.0035479158 -0.0010567946 0.0004661501 -0.0228443419 -0.0064592506 -0.0036044174 -0.0078567185 0.0028580067 -0.0007946991 0.0013292269 -0.0002562413 -0.0005367352 -0.0107782921 0.0040823413 0.0010227913 -0.0145255982 0.0175387910 0.0117495086 -0.0012617371 0.0000620363 0.0023828382 -0.0033825949 -0.0007712374 0.0031807193 0.0004609798 -0.0014565766 -0.0059652597 -0.0010406168 -0.0015811510 -0.0041880264 0.0047482764 0.0032996387 0.0056277353 -0.0026038916 0.0003514163 0.0029171387 -0.0017837340 0.0025152640 0.0070046881 0.0009835979 0.0001758972 0.0002342311 -0.0277070665 -0.0132322642 0.0015868574 -0.0175461025 -0.0117473060 -0.0248958518 -0.0001448162 0.0005168240 0.0008026274 -0.0003342122 -0.0002681591 -0.0004508974 0.0003193379 0.0004265797 0.0002611401 -0.0008741982 -0.0000845400 0.0004632937 0.0164986424 -0.0081537315 0.0002378817 0.0524944826 -0.0008553216 -0.0084982347 -0.0138180383 0.0035105026 0.0010240786 0.0028938411 -0.0063587674 0.0020159607 0.0513850771 -0.0013584963 -0.0075535589 -0.0104901867 0.0182967145 -0.0052208957 -0.0011996100 0.0015955025 0.0002118227 -0.0019453156 0.0153976925 -0.0051841286 -0.0573962461 0.0084669496 0.0085750937 -0.0695430985 -0.0799180854 0.0395791655 0.0333085636 0.0085146450 0.0456143346 0.0103392197 0.0082113624 0.0092950784 0.0014318970 0.0000656816 0.0017694137 -0.0052006851 -0.0161621111 0.0037944857 -0.0325901876 -0.0162525169 -0.0401290112 -0.0321643361 0.0706628645 -0.1026689016 -0.0096123361 -0.0050366127 -0.0106569449 0.0029614808 0.0060657931 -0.0003471060 0.0302547725 0.0103184100 0.0355537885 -0.0067703789 -0.0128248028 0.0001112754 -0.0030381145 0.0031182712 0.0032273418 0.0197368004 0.0077387336 -0.0016457216 -0.0072443775 -0.0035697848 -0.0080609546 0.0136943867 -0.0068303662 -0.0073893563 -0.0019467318 0.0050074943 0.0026901653 -0.0074597910 -0.0071471778 0.0012682181 -0.0034403205 -0.0026194833 -0.0073140201 -0.0199062031 0.0074451755 0.0043349635 -0.0029108906 0.0050053316 -0.0022954354 0.0246968443 -0.0049486840 -0.0017484849 -0.0034514056 -0.0020473956 0.0012851862 -0.0053453849 -0.0033023158 0.0020179446 -0.0032824777 -0.0032033324 0.0017613799 -0.0004644013 0.0021315230 -0.0016070680 -0.0003444033 -0.0039683067 0.0023654835 -0.0000654746 -0.0029877750 0.0025946040 0.0021993274 0.0046593124 -0.0016693856 -0.0025523578 -0.0039198611 0.0006481529 0.0016667518 -0.0011035236 0.0007238028 0.0037856154 0.0023579095 0.0002208760 -0.0075654508 -0.0056101850 0.0087713128 0.0122098441 0.0069518969 -0.0085921668 0.0017385851 0.0075915881 -0.0092436142 -0.1430637112 0.1689342767 0.1950091496 -0.2340900178 -0.2199779122 0.0584013361 0.0666404900 0.0316295801 -0.0278994378 0.0654272791 -0.0708302793 -0.0731600035 0.0111990345 -0.0128978615 -0.0147211156 -0.0151972859 0.0446771127 0.0251084475 0.0089482010 -0.0960667570 -0.0435432858 -0.0924983375 0.0596701836 0.0919363022 0.0328773322 -0.3119102849 -0.1100052756 -0.1565022915 0.1061940958 0.1298845806 0.0125341707 0.3657639253 0.1453254005 0.0157562156 0.0486017366 0.0075318662 0.0018046743 -0.0057898499 -0.0007933681 -0.0936107172 0.0647288336 0.0861436249 -0.0057280955 -0.0006261030 -0.0007095319 0.0003892082 0.0048290242 0.0002893466 -0.0001616860 0.0011113260 0.0007524081 0.0041507940 -0.0148225459 -0.0033541750 0.0015449703 0.0048559571 0.0003896558 0.0009678913 0.0001665930 -0.0004279032 0.0314264917 -0.0194008011 -0.0188379269 0.0024680064 -0.0138465419 -0.0086008469 -0.0530174668 0.0410843933 0.0259029829 0.0009626990 -0.0004368038 -0.0001883738 -0.0143254282 -0.0039891897 0.0064491475 -0.0136230477 0.0056783740 -0.0042183205 0.0096872347 -0.3683141967 0.0076913049 -0.0021344172 -0.0030782861 -0.0041402557 -0.0068754680 0.0141272854 0.0107317259 -0.0072659351 0.0030177629 0.0054171645 -0.0077081564 -0.0053542285 -0.0006963745 0.0011812991 0.0063685675 0.0007695051 0.0067251877 -0.0085376461 0.0028709770 -0.0038502934 -0.0168708261 0.0332511911 -0.0007289748 -0.0466896114 -0.0470233247 0.0122057529 -0.0076245245 -0.0109470507 -0.0055733199 0.0064078412 0.0070819009 -0.0243919857 0.0174981541 -0.0203993734 -0.0104909145 0.0368799518 -0.0057988125 -0.0279388260 0.0117517333 0.0004722472 0.0548081663 0.0118611928 -0.1279933495 -0.0425313124 0.0553831723 -0.1368474640 0.0340247933 0.1059342977 -0.0824767845 0.0869646617 0.1066824204 0.2018304772 -0.1036253172 0.1406350631 0.1849099994 0.0325016083 0.2234202516 0.0859861577 0.0199234573 -0.0124536384 -0.0098459043 -0.0058076597 0.0111834587 0.0051673859 0.0180649117 -0.0005542734 -0.0153647081 0.0054791219 -0.0004881392 0.0041327306 0.0061433051 -0.0018718691 0.0018184207 -0.0038197320 0.0003451903 -0.0012724075 -0.0019904821 -0.0008679594 -0.0021814258 -0.0012345983 0.0004552410 0.0000640827 -0.0006161219 -0.0003050597 -0.0009585052 -0.0070287947 0.0057175656 -0.0116840542 -0.0251422305 0.0217095277 0.0111411818 -0.0001675017 0.0001863595 0.0004193404 0.0016929170 0.0003438790 0.0012481364 0.0144108721 -0.0156552679 -0.0095961643 -0.0007533925 -0.0003867461 -0.0001201542 0.0020952182 0.0009493180 -0.0003367129 -0.0002900817 0.0006256685 0.0022542372 -0.0012237224 0.0000644295 0.0019690362 -0.0013407449 -0.0007429793 -0.0010943885 -0.0080344991 -0.0038932622 0.0013854785 -0.0030518181 -0.0039115562 -0.0081653881 -0.0000861185 0.0003566754 0.0009614763 0.0130081158 0.0059582806 -0.0010591300 0.0124490032 0.0107885867 0.0179697008 0.0001870171 -0.0006066925 -0.0006351886 0.0008848845 0.0000998716 0.0004693229 0.0000528434 -0.0009313136 -0.0007289724 0.0001504799 0.0001882149 -0.0002564045 0.0026893333 0.0039925214 -0.0019839667 0.0046898711 0.0051195079 -0.0028796317 -0.0021394337 -0.0013966328 0.0009224479 0.0010128817 -0.0014803935 0.0003832145 -0.0107454057 -0.0006580811 0.0020613940 -0.0020740352 0.0041922431 -0.0012159875 0.0007813663 -0.0020363304 0.0008872004 -0.0011046945 0.0012671092 -0.0002996018 0.0143840150 -0.0042077901 -0.0028998532 -0.0079105322 -0.0083840792 0.0045518537 0.0001750068 0.0033434047 -0.0022619507 0.0007109024 0.0031017290 -0.0018012264 -0.0004109246 -0.0014798231 0.0005870836 0.0003882603 0.0000524616 0.0005768564 -0.0058749086 -0.0044260300 -0.0069018155 0.0002071469 0.0004370114 0.0001442800 0.0001719132 -0.0009654837 0.0011418788 -0.0006221183 -0.0005738033 -0.0005194347 0.0051759414 0.0010844031 0.0070668211 0.0005284837 0.0017076227 -0.0005872991 0.0043459127 -0.0012950695 -0.0042905906 -0.0243093959 -0.0150343764 0.0070825524 0.0039953466 -0.0044104219 0.0133759398 -0.0228355090 0.0039261422 0.0052120170 0.0057324711 -0.0050008202 -0.0047127860 -0.0078663491 0.0004761224 0.0071171868 -0.0020518852 0.0083958214 0.0042065857 0.0202989635 -0.0166695478 0.0046903064 0.0125525161 0.0064762267 -0.0035697945 -0.2372228884 -0.0027402616 0.0289050505 0.0271947696 -0.0247109909 0.0057706659 0.0506705393 -0.0149122032 -0.0010809038 0.0380655672 0.0557112305 -0.0226415116 0.0167084607 -0.0418181985 0.0593292012 0.0347508384 0.0154284003 0.0433544863 0.0241759051 0.0222483269 0.0118227345 0.0141666710 0.0069988804 0.0106379550 -0.1910757991 -0.0543924821 -0.2001601108 -0.0226269682 0.0111500487 -0.0374899056 -0.0350956627 -0.0207201655 0.0029928104 -0.0401744500 -0.0324959507 0.0645022133 0.0843928171 0.0467380598 -0.0661174659 -0.0026514941 0.0141326081 -0.0518505551 0.0346590876 -0.0523868037 -0.0535110335 0.0633482156 0.0522819233 -0.0163379966 -0.0184618046 -0.0139290721 0.0057259454 -0.0177332069 0.0273866351 0.0229622669 -0.0024503127 0.0051022042 0.0044002039 0.0043022799 -0.0147973925 -0.0081633783 -0.0065224285 0.0303135353 0.0160245401 0.0351815346 0.0019950250 -0.0239160727 -0.0099946603 0.0703866663 0.0189322834 0.0613731188 -0.0400230232 -0.0484099059 -0.0079119253 -0.1301516491 -0.0485481629 -0.0094556531 -0.0183053663 -0.0001549663 0.0052226574 0.0029878941 -0.0018954941 0.0427039469 -0.0229642434 -0.0504203831 0.0030216228 0.0023925266 -0.0001569900 0.0000700142 -0.0015659091 -0.0002163505 -0.0013732272 -0.0001209072 0.0004817965 -0.0009029267 0.0050890312 0.0011150727 -0.0008092203 -0.0020623140 0.0000902005 -0.0001274283 -0.0005702989 -0.0000888077 -0.0174733246 0.0101433561 0.0090230132 -0.0013711722 0.0005876227 0.0017260950 0.0204374539 -0.0165807339 -0.0116462726 -0.0000792017 -0.0027180120 0.0000712549 0.0023888023 -0.0003078320 -0.0011064281 -0.0089085125 -0.0120276817 0.0004161892 0.0275633620 0.0994012943 -0.0149218959 -0.0175339280 -0.0120504302 -0.0104108306 0.0125134348 0.0112949037 0.0026056914 -0.0106795631 0.0003201158 0.0038306065 -0.0079217177 -0.0042836121 -0.0010755093 0.0067055856 0.0010928516 0.0036643978 -0.0458071195 0.0569642145 -0.0208362731 -0.0041862616 -0.0177158513 0.0409002304 -0.0029831746 -0.0553895137 -0.0594017670 0.0095870024 -0.0029905890 -0.0062261069 -0.0046773154 0.0035423897 0.0048099062 0.1746565932 -0.1865067569 0.1966115712 0.0678171856 -0.2556976306 0.0514371828 0.2414075616 -0.1621156983 -0.0423687434 0.0506287425 0.0027038499 -0.1828302394 -0.0461927233 0.0554449304 -0.1601852130 0.0346013178 0.1441269008 -0.1080205180 0.1066179929 0.1377491432 0.2597274855 -0.1273783027 0.1692061025 0.2385191443 0.0487963735 0.2793758183 0.1079573507 0.0170141296 -0.0126292254 -0.0096672382 -0.0056010778 0.0045256330 0.0016554598 0.0159747344 -0.0036924520 -0.0147994553 -0.0109879806 0.0003848741 -0.0030815527 -0.0065577227 0.0003587792 0.0006102657 -0.0004661582 0.0036424186 0.0029979976 0.0051718785 0.0035204818 0.0055521403 0.0047740741 -0.0031791342 -0.0008165675 -0.0012028510 -0.0015287718 -0.0024702186 0.0492431927 0.0127256306 0.0049088289 0.0332256063 -0.0329226457 -0.0152512677 -0.0011128346 -0.0002538526 0.0003114174 -0.0253429866 -0.0006587377 -0.0154908490 -0.0215788953 0.0180347688 0.0087389246 0.0015166823 -0.0005470938 -0.0024505368 0.0066969234 0.0025870992 -0.0027924228 -0.0006056850 0.0025362428 0.0095843233 -0.0000451115 0.0018863758 0.0070864056 -0.0075574635 -0.0048723284 -0.0078276067 -0.0178995629 -0.0026187739 -0.0006837620 -0.0007760894 -0.0085469532 -0.0162124425 -0.0023629926 -0.0012179604 -0.0018023642 0.0555732718 0.0245586471 -0.0047851255 0.0351488655 0.0244327951 0.0505420704 0.0005398438 -0.0006772649 -0.0007774501 -0.0008031933 0.0000990601 -0.0002874197 -0.0007443771 0.0004722278 0.0008719478 0.0020725896 -0.0000420495 -0.0011698503 -0.0191526951 0.0090458034 -0.0001228314 -0.0548640499 0.0005980273 0.0090523673 0.0153025043 -0.0041096841 -0.0010793457 -0.0028829615 0.0075726047 -0.0024875733 -0.0509707694 0.0008848622 0.0078730475 0.0113077666 -0.0183678462 0.0053077159 0.0011700307 -0.0012629399 -0.0005674305 0.0009740618 -0.0169555728 0.0059325264 0.0529286872 -0.0070255727 -0.0065574779 0.0751594519 0.0876978204 -0.0433407912 -0.0371575336 -0.0034159703 -0.0558084827 -0.0110280273 -0.0034976113 -0.0148943058 -0.0020434305 -0.0032456815 -0.0000237847 0.0059376361 0.0188421196 -0.0046447837 0.0231145155 0.0080688051 0.0292688480 0.0364891327 -0.0804801968 0.1171998724 0.0119836102 0.0045525481 0.0146230272 -0.0048393536 -0.0087827052 -0.0004682941 -0.0249942576 -0.0087516218 -0.0266453653 0.0083956097 0.0176031288 -0.0010221938 -0.0027204244 -0.0030422540 -0.0000085964 -0.0179229848 -0.0069612010 0.0037342323 -0.0093770709 -0.0153567440 0.0008595936 -0.0091352082 -0.0029433748 0.0019270401 -0.0017425741 -0.0048133061 -0.0028805856 -0.0036546361 0.0236144258 0.0091819917 -0.0088700929 0.0180118070 0.0188369470 -0.0157656361 -0.0022100696 -0.0013584042 0.0055186847 -0.0081117722 0.0023479945 -0.0339559708 0.0073619946 0.0016625012 0.0048766189 0.0036516797 -0.0019858536 0.0083998251 0.0061753553 -0.0037495336 0.0030124206 0.0031318164 -0.0013167453 0.0009187776 -0.0065539630 0.0063254423 0.0023400692 0.0073761767 -0.0022651924 0.0017221161 0.0060877609 -0.0039289939 -0.0041026074 -0.0074149463 0.0028729117 -0.0059869934 0.0048903938 -0.0096962197 -0.0030512255 0.0022120263 -0.0039463119 -0.0038996971 -0.0012666324 -0.0001668073 0.0013770865 0.0001364861 -0.0008734341 -0.0012131502 -0.0008803808 0.0012560355 0.0008293016 0.0006331258 0.0014486342 -0.0194492963 0.0285891476 0.0369235863 -0.0659181377 -0.0646602294 0.0162631986 0.0168497218 0.0054046835 -0.0079999663 0.0118563009 -0.0194420306 -0.0157560872 0.0027735945 0.0010911859 -0.0022158869 -0.0013601164 0.0104200132 0.0044081242 0.0017713845 -0.0227842888 -0.0099834109 -0.0185200600 0.0228005712 0.0220732513 0.0090221810 -0.0944090092 -0.0338779903 -0.0448177720 0.0289419524 0.0377729103 0.0020032141 0.1007592519 0.0399286439 0.0008416343 0.0113144066 0.0032737644 0.0001048110 0.0008184309 0.0014135996 -0.0124697367 0.0107698539 0.0062337286 -0.0034862122 -0.0049121772 -0.0000443910 -0.0000644088 0.0002807152 0.0000756613 0.0017866676 0.0004698231 -0.0004585750 0.0007690459 -0.0034005128 -0.0012318769 0.0012131868 0.0020103545 -0.0003029113 -0.0001199907 0.0014751813 0.0002808004 0.0123810975 -0.0063053658 -0.0071905461 0.0038764885 0.0096638236 0.0032692740 -0.0167042490 0.0145090967 0.0100944303 -0.0002692629 -0.0021529850 -0.0002076355 -0.0007470929 -0.0000327871 0.0004313804 -0.0038960568 -0.0037457498 -0.0016884360 0.0018729740 -0.0700180773 -0.0034036850 0.0050071465 0.0047403863 0.0022240907 0.0065929012 0.0048706569 -0.0011261975 -0.0004142849 -0.0003567641 -0.0009981016 -0.0021344424 -0.0005939123 -0.0009889953 0.0042320073 -0.0110638049 0.0120028449 -0.0574255190 0.0709382007 -0.0295618278 0.0091851170 0.0513400199 -0.1036982062 -0.0011277861 0.0104467192 0.0041553918 0.0015722115 -0.0000903559 -0.0003193814 -0.0011524097 0.0000994306 0.0004062737 0.2166523132 -0.2144314059 0.2252124608 0.0823168480 -0.3225957943 0.0736832618 0.2917911990 -0.1647926565 -0.0316998238 -0.1481642079 -0.0216279012 0.3902308487 0.1234450591 -0.1626603363 0.3924289075 -0.0808893049 -0.3253139707 0.2429438918 -0.0230065707 -0.0184823994 -0.0220940714 0.0221568999 -0.0353869210 -0.0210062851 -0.0003328805 -0.0372198606 -0.0174775225 0.0015383871 -0.0007417077 -0.0000447619 0.0003005259 0.0071314159 0.0034975703 0.0016718304 -0.0015814051 -0.0021368470 -0.0061262089 0.0037313350 -0.0021873538 -0.0000619876 0.0002072197 0.0006179398 0.0014726566 0.0002468321 0.0010950282 -0.0016354470 -0.0023206912 -0.0027256574 -0.0000283923 -0.0002556985 -0.0013319046 -0.0013253308 0.0027191551 0.0017364887 0.0096459905 0.0017335675 0.0028558543 -0.0028837345 0.0085888189 0.0027792143 0.0022365943 -0.0004873050 -0.0015892602 0.0157518707 -0.0031921152 0.0073604884 0.0136718188 -0.0142122248 -0.0057674716 0.0037054091 0.0015188304 -0.0000207192 -0.0015623433 -0.0002615762 0.0014562406 -0.0027913463 -0.0006811028 0.0016201116 -0.0014290025 -0.0015607391 -0.0027068416 0.0017132976 0.0004357504 -0.0005880306 -0.0145842148 -0.0008418053 0.0027204439 -0.0094499311 -0.0092378242 -0.0098581223 -0.0007769658 -0.0002346556 -0.0000805710 0.0019046274 -0.0004424476 -0.0038336467 0.0009222371 0.0006593493 -0.0019537043 -0.0009491393 0.0020853630 0.0027071459 -0.0009234169 -0.0007380643 -0.0012575886 -0.0000995840 0.0004141992 0.0009503436 0.0015503985 -0.0000028162 -0.0010145570 -0.0064182915 -0.0070233132 0.0037908901 -0.0063299241 -0.0089328249 0.0047029504 0.0026976524 0.0031113276 -0.0017163049 -0.0010189636 0.0029092882 -0.0009135317 0.0281683359 0.0011268320 -0.0050078189 0.0054720931 -0.0087929917 0.0024060456 -0.0015458854 0.0031850720 -0.0013943726 0.0019371374 -0.0017241806 0.0003366706 -0.0282918796 0.0073092044 0.0059946369 0.0113172028 0.0113919686 -0.0064282448 -0.0020615033 -0.0063874275 0.0017250170 -0.0011679460 -0.0052472994 0.0030871644 0.0010977039 0.0023690316 -0.0003083194 -0.0006990963 0.0006800453 -0.0015847442 0.0116852745 0.0080524107 0.0143600409 0.0007744568 -0.0039896631 0.0039429591 0.0006303513 0.0024261925 -0.0013346657 0.0005920971 0.0006169945 0.0004280340 -0.0133208398 -0.0026863587 -0.0167842014 -0.0009332546 -0.0020463833 0.0005100722 -0.0012838968 -0.0013273464 0.0004140456 -0.0064033968 -0.0040529381 0.0023133412 -0.0039328431 -0.0059648136 -0.0000169209 -0.0064241584 -0.0047475175 -0.0010704919 -0.0063663280 -0.0020337275 0.0016616787 0.0248425981 0.0244688435 -0.0102260034 0.0101130535 -0.0064465618 0.0148139449 0.0077899994 0.0073842839 -0.0138978345 0.0510164929 -0.0975051824 0.0296881831 -0.3390840622 0.0757979077 0.0141376571 0.0612193979 0.0369630884 -0.0206918271 0.0851551764 0.0659251940 -0.0328897869 0.0454298140 0.0252085453 -0.0127194024 -0.0190509459 0.0101836842 -0.0381205721 -0.0372799552 0.0585182142 -0.0933521765 -0.0295807617 0.0305198648 -0.0681714600 -0.0578122416 -0.1021226668 0.0230234804 0.2299965361 0.1245157384 0.1801676811 0.0177395021 -0.0008799162 0.0224584479 -0.0331473304 -0.0097242661 0.0046502443 -0.0057508746 -0.0063417160 0.0090571139 0.0123443611 0.0086307506 -0.0088331241 -0.0017480923 0.0041578091 -0.0081684297 -0.0073407002 0.0065800672 0.0079288920 -0.0066143787 -0.0096676532 0.0050549563 0.0018015093 0.0005493244 -0.0012528225 0.0024286605 -0.0014297638 -0.0022777522 0.0005161275 -0.0006316593 -0.0004901476 -0.0004336144 0.0013526939 0.0007649060 -0.0000891330 -0.0028389297 -0.0010484981 -0.0023428567 0.0034939330 0.0032752876 0.0004001129 -0.0093971070 -0.0047451474 -0.0024088843 0.0022453335 0.0015774719 0.0000134674 0.0085084071 0.0036653956 0.0001818501 0.0011594329 0.0003767474 0.0009170877 -0.0003309431 -0.0004523644 -0.0017940666 0.0018161400 0.0007593596 0.0001358287 0.0008306092 -0.0000477110 0.0000414920 0.0002268050 0.0000042848 -0.0003645756 0.0000422299 0.0001846327 0.0001832065 -0.0003392400 -0.0000716766 -0.0000623347 -0.0000607200 0.0000873227 0.0001076412 -0.0001863673 -0.0000810348 -0.0003619076 0.0000106944 0.0000225637 -0.0001709075 -0.0021578611 -0.0004513187 -0.0006360682 0.0001714456 -0.0002716906 0.0001150225 -0.0002317046 -0.0000444016 -0.0009907234 -0.0004183831 0.0004180412 -0.0018296083 -0.0006672100 -0.0003006816 0.0042593661 -0.0130008314 0.0028050821 0.0546450700 0.0747370526 0.0989203713 -0.0008568468 0.0009806557 0.0008450253 -0.0012870044 -0.0003347252 0.0004530189 -0.0005842851 -0.0003073383 0.0000746562 0.0003497324 0.0014609568 -0.0016541643 0.0009205595 -0.0009190989 0.0011249877 -0.0018492778 -0.0102681206 0.0229064043 -0.0002163632 -0.0049733328 -0.0043985807 0.0011511655 -0.0005492497 -0.0009648762 -0.0005497815 0.0005447638 0.0006595208 -0.0018646499 0.0000045403 0.0005493097 -0.0003076743 0.0061157939 -0.0050265210 -0.0055898365 -0.0035268089 -0.0041875332 0.0245537250 -0.0002222467 -0.0887580721 -0.0244893306 0.0276156263 -0.0885343606 0.0204134002 0.0754104686 -0.0566020468 0.0108356962 0.0125199083 0.0204623200 -0.0117975142 0.0164464151 0.0191484318 0.0041112719 0.0235966877 0.0097993462 0.0022072032 -0.0014554204 -0.0011053275 -0.0007195968 0.0002951112 0.0001712605 0.0019257455 -0.0001251070 -0.0017090465 -0.0956924303 0.0555660675 -0.0226130909 -0.0244651637 0.0064151917 0.0051728534 0.0291364520 0.0083459616 0.0243279173 0.0123409200 -0.0095538468 -0.0069202568 0.0166470619 -0.0261991694 -0.0215783947 -0.0294342214 0.0193315904 0.0116264309 0.1443566083 0.0160806985 0.0589683392 0.0832511538 -0.0319869442 -0.0066556537 -0.0013046326 0.0006243587 0.0002554223 0.1057698823 -0.0314182192 0.0095253584 0.0848482837 -0.0864806121 -0.0639469327 0.0235988690 0.0100571644 -0.0013879240 -0.0462976202 -0.0241124636 -0.0048999128 -0.0026777400 -0.0108746840 -0.0322398190 0.0188088609 -0.0035166887 -0.0438820328 0.0315537479 0.0137650988 0.0172217592 0.1668015038 0.0767919419 -0.0313966415 0.0339708280 0.0557645232 0.1195978984 0.0002226390 -0.0002736318 0.0036016383 -0.3038105498 -0.1368114032 0.0261549477 -0.2239103147 -0.1821207477 -0.3341396967 -0.0022547696 0.0024004198 0.0031159369 -0.0023057835 -0.0006315100 -0.0018052340 0.0018308041 0.0042414527 0.0054438488 0.0018149369 -0.0002280709 -0.0020330274 -0.0487116974 -0.0598539370 0.0312675207 -0.0879322000 -0.0724612033 0.0430641076 0.0326735288 0.0225932723 -0.0145272283 -0.0165329370 0.0254172348 -0.0068133334 0.1622265629 0.0120167582 -0.0321034707 0.0406185501 -0.0787963064 0.0231678105 -0.0059222872 0.0275853972 -0.0119370150 0.0163712538 -0.0237772629 0.0059669518 -0.1521904090 0.0500879286 0.0279831986 0.1173994319 0.1184636739 -0.0639444461 0.0399883872 -0.0513114294 0.1003858771 0.0042800637 -0.0487475060 0.0538329748 0.0076128762 0.0285604677 -0.0110934362 -0.0127704850 -0.0241553815 -0.0021815505 0.0756989452 0.0666013594 0.0860924382 -0.0445067671 0.0819286549 -0.1327125087 -0.0168119742 0.0113623815 -0.0363904258 0.0170196756 0.0237801679 0.0076336980 -0.0628282816 -0.0102946238 -0.0953943459 -0.0261560849 -0.0613853442 0.0101530761 0.0003775792 -0.0000228119 -0.0002506870 -0.0016919938 -0.0005972497 0.0003018362 0.0002232810 -0.0004328029 0.0006766592 -0.0012909220 0.0005189499 0.0005234630 0.0010820230 -0.0003045945 -0.0005499064 -0.0017748076 -0.0018949715 0.0008859260 -0.0004872694 0.0019980892 0.0005896768 -0.0029516198 -0.0019714636 0.0024427241 0.0171296216 -0.0338631790 0.0096798449 -0.0868821246 0.0243099406 0.0012654415 0.0181848847 0.0142705325 -0.0072462261 0.0219554183 0.0257376055 -0.0116982490 0.0030590678 0.0043688547 -0.0023192727 -0.0035938247 -0.0073266818 -0.0038116178 -0.0133579464 0.0079142595 -0.0246256172 -0.0063810293 -0.0041577646 -0.0102814387 -0.0338006513 -0.0156006371 -0.0038655689 0.0822427319 0.0346492410 0.0895026229 0.0018189057 0.0005950805 0.0051780622 -0.0048084495 -0.0008511180 0.0007935825 0.0076063952 0.0058871107 -0.0121644780 -0.0148639883 -0.0076707372 0.0118760152 0.0004921174 -0.0032603993 0.0107350825 0.0016559191 -0.0001505455 -0.0038555839 0.0077487379 0.0118012506 -0.0048725562 -0.0010738459 0.0011097243 0.0014516910 -0.0007565592 0.0015154873 0.0010789285 -0.0002686642 -0.0014151719 -0.0002589606 -0.0005667789 -0.0007538667 0.0000782725 0.0005074691 0.0014126936 0.0002041247 -0.0008333373 -0.0066072776 -0.0021676320 -0.0005678236 0.0120238106 0.0054542655 0.0018810306 -0.0017659838 -0.0011749355 0.0006629218 -0.0073846894 -0.0032739867 0.0020512257 -0.0001388239 -0.0013172653 -0.0014786875 -0.0015703172 -0.0003114559 -0.0067460574 0.0016289022 0.0101347799 0.0007022035 0.0017286084 0.0001282347 0.0001908462 0.0001831618 -0.0000707455 -0.0005927747 0.0000158389 0.0002059692 -0.0002006641 0.0002635785 0.0002230127 -0.0005637377 -0.0003201521 0.0002022149 0.0001890457 -0.0007022197 -0.0001913894 -0.0009870097 0.0002647403 0.0006769135 -0.0009230707 -0.0039668842 -0.0012091678 0.0030454305 -0.0028119805 -0.0017942172 0.0002852351 0.0011061774 0.0000907281 0.0002030134 0.0001370543 0.0000084376 0.0025088067 0.0030852504 0.0005464490 -0.0051160347 0.0034884999 -0.0001444048 0.0701786527 0.0145019242 -0.0941160867 0.0011387031 -0.0001183561 0.0002591989 0.0000672969 0.0011039264 0.0007565587 -0.0005300957 -0.0005751731 -0.0001041555 -0.0001934969 0.0005446483 -0.0007438852 -0.0024227200 0.0018766915 -0.0009820647 -0.0011622991 -0.0055294863 0.0112573600 0.0002264034 -0.0017071517 -0.0014219095 0.0001210620 -0.0001499478 -0.0001580839 0.0000779964 0.0001385114 0.0000765707 0.0145877318 -0.0035607691 0.0053319358 0.0051897220 -0.0176947049 0.0022371083 0.0127534157 -0.0015342947 0.0041247766 0.0171098871 0.0036239569 -0.0395888070 -0.0140682137 0.0171141531 -0.0486540327 0.0139002621 0.0357293199 -0.0282317954 0.0032287540 0.0034861354 0.0066680384 -0.0040339835 0.0060862788 0.0068400716 0.0007898825 0.0082769877 0.0033263754 0.0001016295 -0.0001670672 -0.0002939392 -0.0002325273 -0.0010136212 -0.0006608423 0.0003099119 -0.0002728487 -0.0001722838 -0.0274203997 0.0205921739 -0.0019614894 -0.0079713088 0.0022365806 0.0008983623 0.0122903444 0.0002623022 0.0065558869 0.0033969119 -0.0057393372 -0.0056529292 0.0010510122 -0.0077640440 -0.0081182667 -0.0098730310 0.0073242136 0.0048786642 0.0113317864 0.0043962837 0.0075091434 0.0104402242 0.0054007665 0.0086597992 -0.0005129696 0.0005071055 0.0003010539 0.0592904313 -0.0107731271 0.0141793042 0.0474878628 -0.0463541780 -0.0315459035 0.0208109768 0.0084440062 -0.0014478460 0.0235885050 0.0257247945 0.0497231502 -0.0309115896 0.0032595498 0.0558517917 -0.0587334708 -0.0298378483 -0.0023036981 0.0022955900 0.0015782650 -0.0011873812 -0.5001472923 -0.2096032005 0.1136304532 -0.2440579391 -0.2116397556 -0.3315230674 0.0017085898 0.0022658696 -0.0052588315 0.3483763114 0.1383907824 -0.0999848073 0.2489711158 0.2136654319 0.3347425363 -0.0009865662 0.0008961863 0.0011623742 -0.0002858118 -0.0001621981 -0.0002964685 -0.0022535171 -0.0032340425 -0.0027561550 0.0073063099 0.0006952892 -0.0015741175 -0.0175728358 -0.0206009371 0.0108760802 -0.0154867747 -0.0230338524 0.0117636887 0.0069280155 0.0069017658 -0.0039373573 -0.0045738322 0.0096921011 -0.0028770418 0.0706419251 0.0016884959 -0.0124653951 0.0194977773 -0.0346436159 0.0098874254 0.0007552528 0.0090786553 -0.0045324204 0.0032481504 -0.0046868326 0.0012593949 -0.0767164335 0.0203773170 0.0142456473 0.0198486569 0.0187193796 -0.0107216586 0.0119930650 -0.0104593462 0.0266888568 0.0161183450 -0.0044800840 0.0268711007 -0.0002742050 0.0023012878 -0.0024754706 -0.0036684215 -0.0058229844 -0.0014819106 0.0179260243 0.0116085638 0.0229892856 -0.0100915524 0.0129601169 -0.0250893467 -0.0000191853 0.0066206068 -0.0053619015 0.0012419654 0.0088710670 -0.0048987469 -0.0493537441 -0.0144624655 -0.0664118680 -0.0261902684 -0.0464299421 -0.0042238008 -0.0000594672 -0.0000987887 -0.0002327945 -0.0009122057 -0.0004953647 0.0000572063 -0.0005621081 -0.0012321708 0.0009404713 -0.0009058761 0.0004626617 0.0004121634 -0.0012425172 -0.0006127236 -0.0001506790 0.0014900485 0.0066816474 0.0006472957 0.0018947430 -0.0010153364 0.0019302446 0.0040214828 -0.0000090407 -0.0018120189 0.0033165829 0.0027589039 -0.0081035622 -0.0171513267 -0.0084553987 -0.0038215841 -0.0004421996 -0.0056724890 0.0034676402 0.0017297027 -0.0055697094 0.0017797814 -0.0004589256 0.0017245285 -0.0024931819 0.0049689914 -0.0055657541 0.0065672274 0.0072863194 0.0010339283 0.0107435378 0.0042818620 0.0026236059 0.0047916113 0.0072796809 0.0037270273 0.0016895815 -0.0353681886 -0.0134874769 -0.0375924913 -0.0126328908 0.0051236162 -0.0027420258 -0.0061260716 -0.0043805862 0.0034039264 0.0591491299 0.0476573340 -0.0948511355 -0.1154883577 -0.0613452609 0.0919300346 0.0074168327 -0.0274372147 0.0869856464 0.0007054851 0.0162414037 -0.0124434634 0.0410882049 0.0524154595 -0.0076380859 -0.0077353822 0.0085943186 0.0077401643 -0.0010639305 0.0051346504 0.0021817153 0.0003462203 -0.0114016833 -0.0035440447 -0.0040714969 -0.0010008033 0.0023760184 0.0056094481 0.0035684001 -0.0020204746 -0.0144982724 -0.0446495751 -0.0075676589 -0.0033746262 0.0810452335 0.0321503611 0.0122232960 -0.0070411089 -0.0116831949 0.0067874143 -0.0277313726 -0.0152946440 0.0196542488 0.0038081259 -0.0109181177 -0.0123220721 -0.0146668295 -0.0029312264 -0.0696199809 0.0213992645 0.1001318407 0.0052593832 0.0154198382 0.0011179593 0.0018424513 0.0021792185 -0.0006255819 -0.0050359543 0.0002360113 0.0018118068 -0.0017225989 0.0007026394 0.0017882380 -0.0047398302 -0.0024623978 0.0016644580 0.0017098566 -0.0060294078 -0.0016548208 -0.0042009997 -0.0003740092 0.0033550271 -0.0080730458 -0.0351540011 -0.0117866312 0.0217469341 -0.0207215938 -0.0123955455 0.0024032857 0.0095026847 0.0004065061 0.0002361588 0.0008355174 0.0004609461 0.0175173408 0.0253051993 0.0045045056 -0.0373061945 -0.0144061274 -0.0187449139 -0.0128620817 -0.0039105818 0.0177750885 0.0031179944 -0.0063937548 -0.0039435827 -0.0002374139 0.0035358578 0.0029646671 -0.0001632945 -0.0001549447 -0.0003915242 0.0016003634 -0.0014609036 -0.0011284612 -0.0571268514 0.0624326316 -0.0285625951 -0.0086780068 -0.0302513708 0.0623427443 0.0002257411 -0.0124408508 -0.0141420127 -0.0022177135 0.0008791533 0.0016483994 0.0017636453 -0.0003404320 -0.0008954554 0.2492646486 -0.1840127959 0.1994033567 0.0918004464 -0.3537734325 0.0800328212 0.3048409588 -0.1261239142 0.0110060815 0.1090712467 0.0324107412 -0.2155102605 -0.0832575898 0.0976817860 -0.2904900775 0.0988539862 0.1965656317 -0.1617638473 0.0234052306 0.0320757834 0.0664582170 -0.0315151801 0.0436194902 0.0647148120 0.0117624204 0.0717603230 0.0276430916 -0.0035708427 0.0002692492 -0.0013476825 -0.0010689845 -0.0115291989 -0.0071289579 -0.0013838686 -0.0024086387 0.0018130700 0.0174083422 0.0300350468 0.0446495125 -0.0020992286 0.0014585756 -0.0037889455 0.0258207081 -0.0194824040 -0.0097968794 -0.0028248142 -0.0180134092 -0.0232588317 -0.0327670677 0.0023181451 -0.0116961446 -0.0025750034 0.0033182816 0.0043267357 -0.2596753763 0.0041348356 -0.0930225967 -0.1227468748 0.1180123016 0.0844891495 -0.0025021118 0.0028125570 0.0024448152 0.1972115389 -0.0066122858 0.0819432231 0.1577073068 -0.1472116038 -0.0923115519 -0.0031672511 -0.0002129469 0.0008567917 -0.0046028379 -0.0046460255 -0.0087848757 0.0031183787 -0.0018148259 -0.0102943879 0.0108630961 0.0051964905 -0.0000292786 0.0001852654 0.0000402405 -0.0007830555 0.0952351343 0.0382528778 -0.0198180142 0.0414210905 0.0326355930 0.0558329342 0.0006885793 0.0005154281 0.0018286867 -0.0625381282 -0.0247322989 0.0172504130 -0.0436374776 -0.0371144628 -0.0606974195 -0.0013564771 -0.0001733800 -0.0002337085 0.0038185827 0.0006516526 0.0027024014 0.0004550483 -0.0000442198 -0.0004545616 -0.0016729612 -0.0000207827 0.0006716534 -0.0063318058 0.0032713589 0.0001341635 0.0005638108 0.0024491700 -0.0009249022 -0.0018455838 -0.0002500233 0.0003801855 0.0021138586 0.0012953916 -0.0008756931 0.0110016312 -0.0011644076 -0.0011951517 0.0075820162 -0.0086248913 0.0020083975 0.0012406816 -0.0017906409 0.0003775348 -0.0005463975 0.0001806288 0.0000721287 -0.0014277658 -0.0015759155 0.0009030569 -0.0016450044 -0.0015532978 0.0008184602 -0.0057956798 0.0023138395 -0.0109065214 -0.0049005397 0.0008782492 -0.0082328929 -0.0002217472 -0.0011507250 0.0007720851 0.0011588504 0.0034028597 -0.0006598445 -0.0036912160 -0.0037106846 -0.0057293125 0.0059504762 -0.0115246916 0.0175424073 0.0014654306 -0.0008970684 0.0029783144 -0.0009545308 -0.0034244599 0.0011918590 0.0090219197 0.0027027014 0.0129854916 0.0068108962 0.0119316208 0.0008947171 -0.0002797402 0.0008987489 0.0001616783 0.0072571155 0.0002580740 -0.0000139714 0.0006052060 0.0031071270 0.0003132884 0.0010546131 -0.0026560471 -0.0028839386 -0.0094018346 -0.0010765212 0.0034235372 0.0502793424 0.0249378601 -0.0272971364 0.0256091765 -0.0064436380 0.0283412845 -0.0063306642 0.0062857028 -0.0067674573 0.0121503053 -0.0014556695 -0.0146945050 -0.0162076865 -0.0127373170 -0.0075993902 -0.0023962867 -0.0067460442 0.0049045022 -0.0021068376 0.0000372412 0.0003803286 -0.0034314598 -0.0008357624 0.0042817110 -0.0015785767 0.0010747302 -0.0008188075 0.0000650738 -0.0017435520 0.0007595031 0.0001121295 -0.0006883998 0.0007185358 0.0015046538 0.0017607168 -0.0003015740 -0.0028831260 -0.0016274933 -0.0019023886 0.0033630048 -0.0014584237 -0.0004505308 0.0030375327 0.0002421181 -0.0020248079 -0.0203915342 -0.0169637665 0.0345123596 0.0404073331 0.0215120180 -0.0324446297 -0.0018145506 0.0102776493 -0.0313056538 -0.0174947987 -0.0044226850 0.0161727035 -0.0096884113 -0.0189693241 -0.0000463192 0.0019529155 -0.0071894855 -0.0037567883 0.0014716024 0.0125272482 0.0044175409 0.0018774768 0.0056451518 0.0006501874 -0.0016903630 -0.0050538995 -0.0008734422 -0.0059876046 0.0048472011 0.0055655888 0.0098176316 0.0230653887 0.0023144398 0.0033541022 -0.0244005474 -0.0118886341 0.0209089211 -0.0155694418 -0.0170947161 -0.0065038453 -0.0399645056 -0.0113025070 -0.0094737920 -0.0103385758 0.0022640262 0.0115371354 0.0045974152 -0.0032027254 0.0373787263 -0.0111905398 -0.0498959248 0.0011290812 0.0030626776 -0.0000610189 0.0004660278 -0.0001566146 -0.0002073853 -0.0015570519 0.0010067671 0.0008872156 -0.0003645247 -0.0007247483 -0.0000632478 -0.0009042348 -0.0003351518 0.0003554082 0.0003250653 -0.0004494856 -0.0001764050 -0.0050522772 0.0033864424 0.0018701801 0.0000311287 -0.0061037815 -0.0003576627 0.0030128738 -0.0029141308 -0.0014436995 0.0003464699 -0.0024433895 -0.0003709810 -0.0027871321 -0.0022318944 0.0007497185 -0.0092201083 -0.0131836311 -0.0014442248 0.0107352971 -0.0049750929 -0.0015385670 -0.0022756423 -0.0010747054 -0.0002139469 0.0000640871 0.0048894481 0.0024060711 -0.0013882615 -0.0012785750 -0.0003739639 -0.0012089823 -0.0007500147 -0.0000332818 0.0000938787 0.0005419216 0.0001628725 0.0156150679 -0.0166773213 0.0080387974 0.0019504858 0.0078673932 -0.0159494725 -0.0003013596 0.0029471720 0.0034679682 0.0025184730 -0.0011750818 -0.0019813454 -0.0014257446 0.0008825117 0.0012026921 -0.0701096216 0.0478812799 -0.0522658213 -0.0255282693 0.0990853828 -0.0231517983 -0.0837779823 0.0303305151 -0.0064890195 -0.0274227528 -0.0075576928 0.0565959678 0.0212758056 -0.0255636544 0.0747865548 -0.0234461407 -0.0519177557 0.0422826129 -0.0048725071 -0.0070531178 -0.0166825054 0.0074184332 -0.0105479447 -0.0156526509 -0.0016477601 -0.0175965637 -0.0064282228 0.0041313453 -0.0015758076 -0.0005138724 -0.0003323225 0.0058119404 0.0034390294 0.0029302474 0.0008359605 -0.0028294419 0.0357873389 0.0642704505 0.0908498117 -0.0130613862 0.0030056395 -0.0055591703 0.0561119485 -0.0392931041 -0.0199985999 -0.0024035851 -0.0394729052 -0.0491664184 -0.0699035653 0.0054079430 -0.0257946743 -0.0042155380 0.0080621620 0.0081587603 -0.5147533217 0.0425730813 -0.2199379121 -0.2492322848 0.2345760347 0.1794203870 0.0017558768 0.0032898209 0.0022758607 0.4141148623 -0.0181289531 0.1760111270 0.3222587381 -0.3067309399 -0.1840315469 -0.0007521496 -0.0006853402 -0.0001767082 0.0004403744 -0.0000708181 -0.0009411753 0.0013051242 0.0005425919 -0.0001662074 0.0006298506 0.0006478988 0.0009245584 -0.0008450274 -0.0004614411 -0.0001642834 0.0042427619 0.0025214457 -0.0017434991 0.0043977064 0.0040971942 0.0047287869 -0.0005467535 -0.0003285284 -0.0001954595 -0.0004593083 -0.0000588999 0.0014860246 -0.0005094172 -0.0008579793 0.0004011527 -0.0048358155 0.0050411588 0.0065006455 0.0032669713 -0.0007490803 0.0004776877 -0.0000225618 0.0002147980 0.0002650826 0.0001164931 -0.0000361930 -0.0001604656 -0.0171750008 0.0011316354 0.0030593497 0.0062674899 0.0004550964 -0.0013900410 -0.0068664206 0.0025261357 -0.0000012625 0.0049848391 0.0042631924 -0.0024943650 0.0606036867 -0.0022582805 -0.0082247250 0.0235428975 -0.0290185220 0.0075100099 0.0028592988 -0.0028312507 0.0003778932 0.0002349551 0.0026922888 -0.0009405329 -0.0272205082 0.0010316232 0.0073376575 -0.0129229922 -0.0167510828 0.0079129046 0.0002287350 0.0009987513 -0.0005867457 -0.0001208710 0.0010628418 -0.0010477269 0.0003093853 -0.0003124091 0.0005618401 -0.0000304951 -0.0001144239 0.0000367313 -0.0032282164 -0.0015390394 -0.0030482262 -0.0004344261 0.0012425846 -0.0016391375 -0.0000302621 -0.0002900618 0.0001887421 -0.0002703030 -0.0004808574 -0.0000381471 0.0028464250 0.0009136115 0.0036083770 0.0010975724 0.0023685133 -0.0001121749 -0.0000675200 -0.0012034675 -0.0001404711 -0.0065931266 -0.0008142188 0.0000913890 -0.0005657223 -0.0021768745 -0.0001466970 -0.0019468197 0.0013403723 0.0022104920 0.0024390778 -0.0005699671 -0.0015514864 -0.0143485818 -0.0039232604 0.0086488539 -0.0076369139 0.0029336200 -0.0059160905 0.0037770598 -0.0022311972 0.0004862313 0.0039759665 -0.0016951463 -0.0013825689 -0.0265038677 0.0004949368 0.0014795634 0.0034457811 -0.0013007250 0.0002649484 0.0052987285 0.0008775141 -0.0012014461 -0.0010443687 0.0044671428 -0.0010392762 -0.0016273856 -0.0032808411 0.0013640745 0.0028509470 -0.0007819865 0.0049510825 0.0023026284 0.0004262988 0.0027167591 0.0024684345 0.0025879286 0.0002430956 -0.0175485961 -0.0066382351 -0.0165796110 -0.0012890438 0.0009274014 -0.0017680388 -0.0019307703 -0.0017023460 -0.0009056866 -0.0041583813 -0.0067338358 0.0152655992 0.0131387387 0.0081275241 -0.0122069916 -0.0062743391 0.0031048445 -0.0149448355 0.3215029861 -0.1350578736 -0.3172680083 0.0817097835 0.1294554326 0.0013294974 -0.0432183016 0.0162528577 0.0310089093 -0.0528426691 -0.1677273575 -0.0346123403 -0.0360854113 0.0049043351 0.0249627661 0.0651656375 0.0466684457 -0.0230129125 0.0420759601 -0.0126336450 -0.0301877365 0.0273241972 -0.1132371822 -0.0593547630 -0.0518010788 0.1298579582 0.0691312315 -0.2527651944 0.1886802093 0.2161264318 0.0399392717 0.4176908197 0.1262534089 0.0149767507 0.0939369776 0.0264036397 -0.1046467242 0.0352928132 0.0680474225 -0.0662566799 -0.0044285224 0.0806089514 -0.0517588784 -0.1507715070 -0.0031277271 -0.0276288895 -0.0186162927 0.0094714070 0.0602673249 -0.0230301207 -0.0289899918 0.0181471059 0.0267502472 -0.0051293003 0.0506177050 0.0112956706 -0.0202165834 -0.0155308735 0.0535226557 0.0142165788 0.0666262074 -0.0286832955 -0.0271641765 0.0332235320 0.3309067820 0.0513695967 -0.1527849326 0.1497323643 0.0822816525 -0.0206312221 -0.0328074729 0.0029112680 0.0530741976 0.0336990208 -0.0182706133 0.0339599589 0.0526492267 0.0053905076 0.0261854361 0.1901859444 -0.0482903486 -0.0028385282 -0.0019020067 -0.0011166991 -0.0054364445 -0.0255212767 -0.0142235094 0.0079445770 0.0011770415 -0.0046219808 0.0111827686 0.0075761264 0.0015607023 -0.0022826844 -0.0015393070 0.0003823434 0.0010707055 0.0005515107 -0.0001554715 0.0005052857 -0.0016453830 0.0028401860 0.0000237103 0.0005271849 -0.0006178250 -0.0150606837 0.0088117098 0.0137497079 0.0073355389 -0.0070539578 -0.0081277041 -0.0054876931 -0.0022999639 0.0005366091 -0.0012007813 0.0014992729 0.0046675009 -0.0005870940 -0.0005968877 -0.0014561321 0.0038748308 -0.0023499663 -0.0295387825 -0.0046142872 0.0138275550 -0.0026927285 -0.0133099642 0.0151512041 -0.0069731604 -0.0012293516 -0.0000387280 0.0020580409 0.0003195594 -0.0007487118 0.0028682088 0.0008290123 -0.0005597568 -0.0006535834 -0.0243215875 0.0085584597 0.0038517657 0.0045981175 -0.0246996220 -0.0128412772 -0.0195221179 -0.0046663805 0.0169877643 0.0021377320 0.0083597512 0.0103271386 -0.0040857786 0.0007019050 -0.0012137613 0.0079409084 -0.0044439322 -0.0014239348 0.0010513480 -0.0043597355 -0.0051439590 -0.0082253896 -0.0000205906 -0.0036599708 -0.0007055131 0.0010659437 0.0010827528 -0.0570614412 0.0059925083 -0.0251832599 -0.0219193364 0.0225958303 0.0179742579 0.0000821607 0.0004365677 -0.0000458749 0.0492510449 -0.0025046352 0.0197721163 0.0358404938 -0.0338706817 -0.0206043930 -0.0011271469 -0.0006192193 -0.0000612853 0.0011609875 0.0003702078 -0.0002178406 0.0006816489 0.0003467413 -0.0000170338 0.0004170945 0.0003878534 0.0012449860 -0.0010088919 -0.0005894710 -0.0007035020 0.0018306237 0.0009063853 -0.0008987778 0.0034360004 0.0045158703 0.0033069270 0.0010667226 -0.0014402795 -0.0026524151 0.0039849546 0.0034273321 -0.0001568326 0.0014857331 0.0001983411 0.0026078256 -0.0004785111 0.0003838012 0.0008477482 0.0002209616 -0.0003255237 0.0000740506 -0.0001553775 0.0010237904 0.0016625542 -0.0007533771 -0.0001753696 0.0005850820 -0.0059180942 -0.0013791783 0.0015907654 -0.0014606366 -0.0021038608 0.0011902760 0.0001697247 0.0004767787 -0.0002595499 0.0000741737 0.0026033529 -0.0010048407 0.0159003786 -0.0007694747 -0.0022405688 0.0072036000 -0.0104838966 0.0028285677 0.0013044632 0.0005457198 -0.0007001417 -0.0003237057 -0.0007369768 0.0003533569 -0.0156217738 0.0030466920 0.0036916869 0.0014028189 0.0016196294 -0.0008880945 -0.0012353133 0.0016796673 -0.0034622241 -0.0013071299 0.0012963182 -0.0032500881 0.0005646089 -0.0007793825 0.0016286681 -0.0000586513 0.0009190312 -0.0007737985 -0.0059948654 -0.0042007795 -0.0072945923 0.0009963815 -0.0024732784 0.0032160056 0.0008529549 0.0001632224 0.0011923050 -0.0009395578 -0.0019066934 0.0000472697 0.0035723113 0.0015592775 0.0047939156 0.0031175907 0.0063570309 -0.0002106065 0.0000614673 0.0076970735 0.0027198271 0.0377829288 0.0093410413 -0.0013176363 -0.0000269203 0.0084400619 -0.0070570356 0.0167506296 -0.0096535415 -0.0137577901 0.0098596007 0.0066953164 0.0041990362 -0.0298877142 -0.0430296988 0.0115203868 -0.0275279313 0.0117899394 -0.0310018094 -0.0478990575 0.0051011956 0.0188540864 -0.0057578731 0.0071759289 -0.0018588097 0.0234199006 -0.0049808523 -0.0018881527 -0.0057135874 -0.0021159829 0.0015802751 -0.0039148584 -0.0055437477 0.0032931317 0.0058490168 -0.0029143112 -0.0000759828 0.0057326617 0.0045516527 0.0016580459 -0.0021917760 0.0035047452 -0.0053992664 -0.0040625501 -0.0002762650 -0.0052709609 -0.0062273327 -0.0071742806 -0.0001001987 0.0230360064 0.0091836097 0.0209623565 -0.0012107901 -0.0002397693 0.0007345065 -0.0019574404 -0.0008953079 0.0018751117 0.0128621028 0.0151180762 -0.0312432560 -0.0303006159 -0.0174857750 0.0258874030 0.0093396804 -0.0126563896 0.0316197443 -0.1641214679 -0.0119792570 0.0885360786 -0.1233352806 -0.1645828031 0.0154677760 0.0044812982 -0.0510226657 -0.0205319282 -0.0049056579 -0.0219806897 -0.0037158664 -0.0089292659 0.0857277095 0.0337928094 0.0326681623 -0.0125256004 -0.0245626001 -0.0295923405 0.0125550015 0.0256650730 0.0892422674 0.1258704586 -0.0181414694 0.0087598647 -0.2222267231 -0.0735531825 -0.0842762776 0.0316913827 0.0653504869 -0.0424410323 0.0028433843 0.0086719676 -0.0980377829 -0.0448234394 0.0529393171 0.0620863585 0.1176211044 0.0092148910 0.4255091902 -0.1169147383 -0.5367767852 -0.0446251130 -0.1139715824 0.0019232276 -0.0101650127 -0.0105663065 0.0030290367 0.0294560141 -0.0007707190 -0.0123098076 0.0141335557 -0.0078988669 -0.0087401467 0.0440792158 0.0101284910 -0.0171584796 -0.0099855443 0.0501741789 0.0116619828 0.0805148153 -0.0319343925 -0.0432753463 0.0315742364 0.3092332336 0.0445709190 -0.1873037695 0.1656247327 0.0985963540 -0.0174872354 -0.1200582952 -0.0103637655 -0.0467857439 -0.0306601652 0.0134479468 -0.0336486833 -0.0897650543 -0.0096975823 -0.0302338178 0.0944655673 0.0568085212 0.0062203384 0.0043003822 0.0025576811 0.0078140725 0.0448873916 0.0074398275 -0.0060782096 -0.0094275993 -0.0055320559 -0.0141336379 -0.0093118198 -0.0010178577 0.0041341490 0.0025382796 -0.0015921786 -0.0067642184 0.0033960269 -0.0019796098 -0.0030322551 -0.0103385353 0.0159338800 -0.0005774919 -0.0028805934 -0.0016037181 0.0146441361 -0.0061058854 -0.0099159346 -0.0088913470 0.0039381472 0.0060594379 0.0325002890 -0.0066348970 0.0117981545 0.0089139439 -0.0332836821 0.0014274306 0.0289500955 -0.0046939470 0.0091104451 0.0379966731 0.0124010932 -0.0603121491 -0.0254537970 0.0398963121 -0.0598688588 0.0168444910 0.0500955818 -0.0397548550 0.0058154813 0.0058833266 0.0081739257 -0.0050868947 0.0060838510 0.0075317698 0.0033944291 0.0138420802 0.0066561658 0.0289905694 -0.0043766588 0.0047620947 -0.0027446388 0.0315457745 0.0198339309 0.0175614948 0.0154242677 -0.0182171554 0.0058801460 -0.0021360648 0.0022405404 -0.0032105105 0.0007588078 -0.0029134368 0.0014267730 -0.0028415452 -0.0032081039 0.0005912435 0.0039971284 0.0050760483 -0.0024322295 0.0017819413 0.0013776201 0.0045632365 -0.0046306022 -0.0021577619 -0.0076129985 -0.0095980221 0.0071828043 0.0061523144 -0.0139522080 -0.0036761639 -0.0013514498 0.0013392314 0.0014309288 -0.0126318669 0.0040227276 -0.0039739092 -0.0182757896 0.0207319633 0.0100775860 0.0026586858 0.0014938245 0.0001208286 -0.0026111178 -0.0006041093 0.0014876698 -0.0012924342 -0.0008137733 -0.0005513271 -0.0005703452 -0.0012125320 -0.0029897063 0.0021821560 0.0014067551 0.0018501211 -0.0072953641 -0.0038837688 0.0029905373 -0.0058076876 -0.0064897780 -0.0032574156 -0.0009620279 -0.0002676637 0.0002265582 -0.0089008890 -0.0048029030 -0.0013478718 -0.0055602048 -0.0041984355 -0.0090457559 0.0011569753 -0.0021587375 -0.0024533269 0.0002709070 0.0003064461 0.0006333408 0.0000651375 0.0006183555 0.0006952094 0.0010530118 0.0000452068 -0.0005616148 0.0069008737 0.0038924230 -0.0025922404 -0.0013878212 0.0040523670 -0.0016901645 0.0005941526 -0.0006532571 0.0002119091 0.0007502527 -0.0041956873 0.0014497208 -0.0269448047 0.0016073286 0.0036304622 -0.0110527149 0.0177219011 -0.0049929155 -0.0027914223 -0.0013004962 0.0013946560 0.0005050987 -0.0001153150 -0.0000827250 0.0331389851 -0.0063504901 -0.0071068296 0.0040346375 0.0049389543 -0.0024334588 -0.0007359506 -0.0026745580 0.0012911457 0.0031870069 -0.0014522108 0.0061331197 -0.0027602346 0.0000965625 -0.0046557974 0.0009249772 0.0003568603 0.0011813516 0.0170650746 0.0099063064 0.0213604956 0.0024829167 -0.0050877518 0.0082932453 -0.0002609943 -0.0005725998 0.0000709255 0.0017674118 0.0042584665 -0.0006148236 -0.0113270751 -0.0056688417 -0.0136371678 -0.0098906570 -0.0195467582 0.0002120255 0.0012150590 -0.0136639967 0.0035106294 -0.0702274136 -0.0036149915 -0.0001112638 -0.0024086849 -0.0120084840 -0.0248741281 -0.0258991223 -0.0089527696 0.0126108645 -0.0078265510 -0.0132804777 0.0004029751 0.0498664860 0.0454908484 -0.0163463554 0.0148252536 -0.0057383123 0.0329622431 0.0468451241 0.0078927758 -0.0380552347 -0.0621428581 0.1000543530 -0.0320991531 0.1878095417 -0.0557212546 -0.0062222454 -0.0603236887 -0.0321403650 0.0193248389 -0.0145169497 -0.0678294181 0.0344707982 0.0759461659 -0.0196653627 0.0035121593 0.0594807039 0.0349677345 0.0451810755 -0.0015621174 0.0599501403 -0.0426629441 -0.0394949879 0.0074610602 -0.0648743101 -0.0821730482 -0.1012577534 0.0039307832 0.1728290529 0.0859947842 0.1496755415 -0.0194744395 0.0067748798 -0.0265793251 -0.0310971545 -0.0141028150 0.0048719762 -0.0047115561 -0.0021530466 0.0029095605 0.0110164222 0.0059653699 -0.0071155668 0.0029405799 -0.0010484323 0.0037207854 0.0279833079 -0.0059106464 -0.0253653079 0.0149387911 0.0176167218 -0.0005557898 -0.0029405709 0.0032462333 0.0027692334 -0.0022991323 -0.0025799422 0.0001480991 -0.0001845383 -0.0062214864 -0.0016705239 0.0001464410 0.0018223445 0.0005172573 0.0032291249 0.0003093730 -0.0020476441 -0.0041411849 -0.0121525502 -0.0010551089 -0.0032173138 0.0233217733 0.0064572316 0.0018072509 0.0016708537 -0.0004767473 0.0041894492 0.0058901728 0.0008339877 0.0095193600 0.0067381355 -0.0039780946 -0.0093282831 -0.0100602478 0.0013917956 -0.0418223485 0.0104212574 0.0514026492 0.0022128214 0.0056234674 -0.0001585162 -0.0005120785 -0.0000947053 0.0001896268 -0.0003365326 -0.0011280243 -0.0000517080 -0.0007303641 0.0029861062 0.0009643378 -0.0020765023 -0.0010897396 0.0006613145 0.0004081690 -0.0025290168 -0.0005580389 -0.0079691867 0.0035062961 0.0043243128 -0.0025387804 -0.0187248680 -0.0036818551 0.0150644076 -0.0125502908 -0.0076930912 0.0008769320 0.0099428680 0.0010160257 0.0074208488 0.0046569158 -0.0023814688 0.0018328056 0.0084337187 0.0015404440 0.0070684000 -0.0062673319 -0.0212856492 0.0782752570 0.0575767665 0.0238375967 -0.0004376994 -0.0036251795 -0.0006492666 0.0020508900 0.0015745710 0.0002953957 0.0005423961 0.0002311317 -0.0001490572 -0.0005642788 -0.0003460860 0.0007923308 -0.0025074757 0.0027759292 -0.0015658049 -0.0002403939 0.0014734661 -0.0005304969 0.0004159954 -0.0003515053 -0.0009376005 -0.0016382182 0.0005295815 0.0010680399 0.0008932597 -0.0004631949 -0.0006793263 0.0135613060 -0.0076931898 0.0083137071 0.0045654285 -0.0179224468 0.0046034186 0.0128596247 -0.0019637264 0.0027680445 -0.0077964764 -0.0030442976 0.0076410695 0.0031738940 -0.0129544863 -0.0068653514 0.0120903794 0.0001147869 -0.0030272852 -0.0007250134 -0.0000146604 0.0041608773 -0.0007081314 0.0012797320 0.0027035377 -0.0014651643 0.0028020544 0.0002067323 -0.0031734033 0.0012790652 0.0004702059 0.0005307361 -0.0019599090 -0.0013958575 -0.0021926307 -0.0005299579 0.0022466486 0.0813916966 -0.0341123170 0.0253686296 0.0210205257 -0.0048960311 -0.0005585874 -0.0174481208 -0.0125265223 -0.0238378707 -0.0110084913 0.0082895412 0.0053616476 -0.0203567898 0.0221980442 0.0157835994 0.0286896122 -0.0234872397 -0.0136878905 -0.1532627065 0.0009974013 -0.0720554156 -0.0930360793 0.0479971082 0.0214801327 -0.0006942549 0.0001986000 0.0004103506 -0.0633945163 0.0269080761 0.0013969354 -0.0566853652 0.0617023418 0.0401654027 0.0282570846 0.0132789614 -0.0000716378 -0.0243926310 -0.0053317803 0.0231951050 -0.0148718807 -0.0085664285 -0.0066553136 -0.0117928171 -0.0156894276 -0.0338811821 0.0261545278 0.0171085847 0.0245254711 -0.1175025888 -0.0472233739 0.0351594448 -0.0860532054 -0.0541364497 -0.0560656914 -0.0001867224 -0.0002034235 -0.0000572855 -0.0834283193 -0.0462776622 -0.0222243716 -0.0641792876 -0.0571347156 -0.1035095802 0.0023157906 -0.0028474260 -0.0036938841 0.0029393745 0.0008817030 0.0024452636 0.0007298784 0.0029330462 0.0045451986 0.0049208523 0.0000576224 -0.0026863155 0.0641728684 0.0402807921 -0.0252109919 -0.0376580461 0.0389378159 -0.0131392584 0.0127805887 -0.0014883293 -0.0011812728 0.0105166974 -0.0446099786 0.0149697622 -0.2764956870 0.0236712990 0.0361777295 -0.1238802135 0.2080857831 -0.0585500027 -0.0402993536 -0.0128716039 0.0159999592 0.0080544478 -0.0102120156 0.0018286947 0.3950803740 -0.0721049145 -0.0796880430 0.0864931525 0.0998837271 -0.0507603159 -0.0223188548 -0.0327491747 -0.0055245024 0.0385469193 -0.0147199048 0.0717589196 -0.0331423571 -0.0038376630 -0.0524104525 0.0104759508 0.0127408669 0.0067493552 0.2147510162 0.1205084984 0.2777444911 0.0423455798 -0.0980874203 0.1471636691 0.0065054245 -0.0019016787 0.0109395734 0.0180391554 0.0493639126 -0.0110094926 -0.1662915698 -0.0774639088 -0.1973599238 -0.1292382737 -0.2499216568 -0.0005870604 -0.0001493880 0.0008409189 -0.0004731955 0.0058537167 0.0003833061 -0.0004776522 0.0006921269 0.0016029571 0.0028794350 0.0017271908 0.0014332148 -0.0004219842 -0.0009746307 0.0007194310 0.0006154790 0.0025852492 0.0010443130 -0.0017268699 0.0033288569 -0.0035226494 -0.0010355359 -0.0001018797 0.0015810012 -0.0006620555 -0.0018980111 0.0018021111 -0.0001257845 0.0030481642 0.0002698274 0.0003380236 -0.0010919921 0.0001793603 -0.0000771135 0.0015146883 -0.0005180588 0.0001381515 0.0017786828 -0.0001403729 -0.0000327876 -0.0001333056 0.0000151534 0.0001777558 -0.0001269500 0.0016458864 -0.0011961136 0.0001590306 0.0015338388 -0.0010352946 0.0003864010 -0.0017433866 0.0015569741 -0.0016301430 0.0004578148 -0.0039295244 -0.0005816678 0.0008247045 -0.0006335712 -0.0010730297 0.0000398547 0.0001009316 -0.0016979950 -0.0039556901 0.0066674014 0.0053266339 0.0040869795 -0.0046736167 -0.0049863204 0.0051595977 -0.0071559712 -0.1847727765 0.0469766727 0.1482998255 0.2035094685 0.2310161993 -0.0442824103 0.0207025808 0.0682625926 0.0114080730 0.0712532527 0.0499919813 -0.0290806604 0.0062569886 -0.1650557884 -0.0577331095 -0.0921876536 0.0419323238 0.0720148760 0.0290413721 -0.0419710763 -0.0357229358 -0.0907048710 -0.0888784418 0.0277130384 -0.0267135667 0.4512721927 0.1507875220 0.2620368177 -0.0976441825 -0.1966132542 0.0362973565 -0.0697977500 -0.0428367835 -0.0553137446 -0.0454812103 0.0230135771 0.0570952001 0.0755656338 -0.0014598186 0.1833935140 0.0062840395 -0.2671561609 -0.0449777186 -0.0707324812 0.0081015410 0.0096575841 0.0030173053 -0.0036447640 0.0016677199 0.0107973103 0.0013154054 0.0080468115 -0.0261068438 -0.0084786608 0.0326743101 0.0027141286 -0.0130545456 -0.0009781188 0.0398555052 0.0062850886 0.1594133930 -0.0883594074 -0.0849061348 0.0248844242 0.2996000679 0.0461275480 -0.1947245423 0.1537036914 0.0996570837 -0.0095747963 -0.1743268226 -0.0219062754 -0.1057419460 -0.0667981810 0.0346722459 0.0239247294 0.0748086271 0.0118580828 0.0097085113 -0.0921557678 -0.0345830220 -0.0020721784 0.0006323175 0.0054839702 0.0014467935 0.0280561398 0.0044357065 0.0032980064 -0.0102997215 -0.0087962281 -0.0083150691 -0.0046233504 -0.0003445576 0.0020376239 0.0000477118 0.0005343075 -0.0007533514 0.0000617135 0.0002927621 -0.0008119892 0.0032465196 -0.0050528735 -0.0000460148 -0.0002613743 -0.0008469163 0.0044851298 -0.0009565722 -0.0024559947 -0.0042525783 -0.0009058309 0.0010470841 0.0029223358 0.0016412045 0.0004852954 0.0006792974 0.0015689777 -0.0060979223 -0.0031454247 -0.0004954279 -0.0015479863 -0.0016552396 0.0044439272 0.0229621204 0.0043404191 -0.0070083731 0.0148008453 0.0043372370 -0.0280039021 0.0182200391 0.0002064812 0.0013132352 0.0044749931 -0.0002711766 0.0003173835 0.0004996862 -0.0012176863 0.0019426514 -0.0001084701 0.0128729260 0.0057347244 0.0130865855 0.0017533530 0.0242557484 0.0152866825 0.0031461528 0.0191400035 -0.0051933753 0.0004229902 -0.0048072786 -0.0047616898 0.0081062649 -0.0008758313 0.0041373956 -0.0048058351 0.0029853773 0.0019918584 -0.0029507202 -0.0041167846 -0.0062533162 0.0036857029 0.0004845878 0.0018118374 -0.0030856088 0.0043507540 0.0026363383 -0.0053381549 0.0054660185 -0.0073852954 -0.0093174226 0.0138385698 0.0017822275 0.0015632172 0.0001081527 0.0000339560 -0.0005902828 -0.0005158736 0.0013684322 0.0079710500 -0.0086447995 -0.0025946839 0.0035692760 0.0013308338 -0.0020789347 -0.0007115238 -0.0010993700 -0.0029079498 -0.0029305286 0.0002705316 0.0052873627 0.0021559060 0.0006701749 -0.0007827151 -0.0010925631 -0.0018572143 -0.0038880988 -0.0004718047 -0.0014126703 -0.0011399593 -0.0025975028 -0.0033734302 -0.0059130876 0.0004516931 0.0026075385 0.0030325608 0.0010502086 0.0028205021 -0.0015595671 0.0036833183 0.0034649697 0.0027106650 -0.0005566853 0.0005042170 0.0009625874 0.0001154754 -0.0004789709 -0.0005612240 -0.0001133080 -0.0024410597 -0.0028260117 0.0002954080 0.0000359447 -0.0001130781 0.0014635674 -0.0002177613 -0.0001573292 -0.0018941092 -0.0002640899 0.0003594408 0.0012914662 0.0004067462 -0.0003576800 -0.0000258183 -0.0010492833 0.0004075783 -0.0067487101 0.0011132351 0.0005864600 -0.0041056933 0.0066440024 -0.0019058593 -0.0015537928 0.0004268938 0.0001769128 0.0001619063 -0.0008951211 0.0002891669 0.0088128379 -0.0008411485 -0.0018658496 0.0046760746 0.0054958954 -0.0028752667 0.0001552262 -0.0008175698 0.0008577683 -0.0008703086 -0.0010913984 -0.0001448644 0.0003783425 0.0007065671 0.0000818634 -0.0000820361 -0.0003657240 0.0001571703 0.0003276848 0.0007004930 -0.0000501018 -0.0005490930 0.0015140406 -0.0022140929 -0.0004815349 0.0000430993 -0.0007838688 0.0002630086 -0.0000424909 0.0004518045 0.0015147884 0.0008141640 0.0014521430 0.0014619343 0.0022915725 0.0003694452 0.0025286735 -0.0076243497 0.0016715386 -0.0458664124 0.0012057291 -0.0029514066 -0.0038007316 -0.0154147681 -0.0116504025 -0.0234759770 0.0010887539 0.0130619015 -0.0037577311 -0.0068961370 0.0003941446 0.0324756118 0.0209188336 -0.0135854404 0.0084974483 0.0012992964 0.0240877235 0.0333518541 -0.0081039039 -0.0089810624 -0.0634803083 0.0124620742 0.0034464725 0.1661313090 0.0223382760 -0.0234196963 -0.0454067077 0.0329427171 -0.0072708426 0.0259967311 0.0186868996 -0.0069872499 0.0600305546 -0.0249627032 0.0059278969 -0.0221022788 -0.0103891480 -0.0229938517 -0.0322649670 0.0447055025 -0.0765888859 0.0359344066 0.0800311649 -0.0140785051 0.0693257326 -0.0163700074 0.0869822539 -0.0762660403 0.0277054374 -0.1718131655 0.0117018916 0.0056471968 0.0116368608 -0.0226660277 -0.0030867661 0.0029875615 0.0008555578 -0.0011326221 -0.0007586342 0.0005100518 0.0011523125 0.0006498436 -0.0002920769 0.0007956268 0.0007267871 0.0086892745 -0.0047181402 -0.0101769948 -0.0048703693 -0.0030122821 -0.0013973181 -0.0016466325 -0.0025615375 0.0002933939 -0.0024045281 -0.0033721453 0.0002808385 -0.0008331951 0.0054896329 0.0024227502 0.0036462233 -0.0010872643 -0.0026465746 -0.0007003202 0.0018341792 0.0011839289 0.0049111526 0.0011785224 -0.0027131421 -0.0007611511 -0.0072069619 -0.0026415090 -0.0100323168 0.0044588208 0.0078695623 -0.0008535926 0.0029480628 0.0016839153 -0.0002917684 0.0023573251 0.0011145594 -0.0023661496 -0.0017382448 0.0009622192 0.0029849368 -0.0062157712 -0.0018001661 0.0026934920 0.0022358638 -0.0009221570 -0.0035207385 -0.0018976304 0.0012440773 0.0031234898 -0.0026557767 -0.0017115067 -0.0003703944 0.0043110484 0.0009478266 -0.0006781603 -0.0003253730 0.0001812330 -0.0006203653 -0.0010622134 0.0001151750 -0.0213952029 0.0127911706 0.0109420264 -0.0021013349 -0.0262931877 -0.0049806560 0.0149043193 -0.0105366766 -0.0074135220 0.0000500987 0.0178959770 0.0025873823 0.0139044226 0.0088785662 -0.0047994359 -0.0007814082 -0.0016874550 -0.0000523918 -0.0003404954 0.0013392802 -0.0035522521 -0.0962204851 -0.0111835823 0.1136634912 -0.0002193918 -0.0006813861 -0.0000743714 0.0008313404 0.0001626828 -0.0002740976 0.0001058780 0.0001014947 0.0000002220 -0.0003267930 -0.0001230853 0.0001272798 -0.0007633305 -0.0002521812 0.0000971463 -0.0000157530 0.0001526693 0.0001930166 0.0002457810 -0.0000709460 -0.0002293923 -0.0005160368 0.0002675572 0.0004013387 0.0001729879 -0.0002652170 -0.0002643748 0.0090244543 0.0056656061 -0.0024438509 0.0031929315 -0.0066446849 -0.0034767313 -0.0007087857 0.0058058157 0.0046722261 -0.0012986598 -0.0006285719 0.0006678000 0.0004106336 -0.0024405981 -0.0028202217 0.0031672436 0.0011062645 -0.0015871753 -0.0006454460 -0.0004689832 0.0013239129 -0.0000708376 0.0003096081 0.0007755878 -0.0009514920 0.0011025335 0.0000927994 -0.0007381094 0.0005479343 0.0005240175 0.0003061916 0.0001185890 0.0000931950 -0.0007552950 0.0003552541 0.0006278745 0.0360194275 -0.0285104025 -0.0166004577 0.0290703601 0.0009707002 0.0175289645 -0.0105020477 -0.0009269459 -0.0051939590 -0.0152225191 -0.0147790080 -0.0239430367 -0.0018964677 0.0145892439 0.0151357580 0.0072205585 0.0034378991 0.0074855719 -0.1079349058 0.0176672008 -0.0474303563 -0.0707352318 0.0560784802 0.0297304876 -0.0000168613 0.0003611563 -0.0004759249 -0.0016659721 0.0136728092 0.0206857332 -0.0066312025 0.0214564932 0.0181035830 0.0766011755 0.0239724723 -0.0578649294 -0.0010848287 -0.0173316605 -0.0629611586 -0.0517511595 0.0193552990 0.1477401989 0.0499335694 0.0201695941 -0.0102711181 -0.0394670498 -0.0575378181 -0.1141477578 -0.0642132774 -0.0495344313 -0.0301217610 -0.0219033205 -0.0453879613 -0.1044542318 -0.0039722301 0.0046142083 -0.0022732953 0.1890082121 0.0843967405 -0.0452141027 0.1291696322 0.1252000335 0.1211800504 -0.0011942853 0.0005404265 0.0006054063 0.0046451292 0.0005951748 0.0027974376 -0.0062274854 -0.0104915069 -0.0126930866 0.0146912169 0.0016729351 -0.0029775895 0.0602700671 -0.0283766140 0.0024827881 -0.0533505527 -0.0152637072 0.0138650480 0.0478266535 0.0157266723 -0.0137378823 -0.0065519528 -0.0373813102 0.0152037003 -0.2265428082 0.0399832147 0.0203384312 -0.1439817309 0.2201969074 -0.0605086605 -0.0454712429 0.0200561012 0.0032310611 0.0055531728 -0.0246606189 0.0075545952 0.2629139168 -0.0194595847 -0.0658643080 0.1334795555 0.1589896409 -0.0802533745 0.0281929020 -0.0341833290 0.0710716773 -0.0707333450 -0.0747304599 -0.0333677488 0.0392976671 0.0527912993 0.0231091409 -0.0066227959 -0.0375549110 0.0177079826 -0.1030444749 -0.0127740274 -0.1663643349 -0.0691409248 0.1851466861 -0.2536430896 -0.0461641077 0.0009643417 -0.0723153630 0.0078666166 -0.0305803104 0.0362587963 0.2035317469 0.1045451803 0.2207833420 0.1700585746 0.2987776674 0.0274429669 0.0000241137 0.0002642681 -0.0000016650 0.0000649871 0.0001156304 0.0000317053 -0.0004017704 -0.0005258414 -0.0007082158 0.0014335982 0.0001519768 -0.0003158302 0.0007882278 -0.0006709056 -0.0001339597 -0.0037899147 0.0074379530 0.0069807659 -0.0018927573 0.0009984997 -0.0012861543 -0.0063714956 0.0040146615 -0.0046547664 0.0040227935 0.0005745039 -0.0011239187 -0.0070321939 -0.0030265475 0.0007850243 0.0017125930 -0.0028325338 0.0010173830 -0.0025815708 -0.0019908287 0.0011949134 -0.0014530703 0.0003141207 0.0000107451 0.0015730437 0.0018301844 0.0005829099 0.0001453686 -0.0010659546 0.0008722256 -0.0016004537 -0.0015540212 -0.0007234035 -0.0012261634 -0.0005663208 -0.0012928284 0.0044313640 0.0002984515 0.0050831820 -0.0004145100 -0.0000133638 -0.0001361781 0.0006943819 -0.0000572659 0.0000938796 0.0010820049 0.0007401299 -0.0016720983 -0.0020760112 -0.0008674878 0.0016311133 -0.0006967432 -0.0009070393 0.0017511456 -0.0528016374 -0.0025426475 0.0200360982 0.0314418732 0.0499861676 -0.0024486647 0.0036363633 0.0214953355 0.0052750508 0.0164054694 -0.0381758569 -0.0267140124 -0.0126945547 -0.0389443108 -0.0045346400 -0.0037387531 0.0271904836 0.0122306160 0.0099056254 -0.0320312315 -0.0180056026 -0.0023119487 -0.0225078708 -0.0091968499 -0.0246131845 0.1257132616 0.0503027846 -0.0193455077 0.0384705137 0.0239624042 0.0067980196 0.1432915880 0.0450023166 -0.0619801298 0.0150001424 0.0502377655 0.0100817812 0.0245821948 0.0067284217 0.2931150773 -0.1743502961 -0.3181951167 0.0524378154 0.0255571136 -0.0204371033 -0.0585981007 -0.0308300358 0.0209445224 0.0559438174 -0.0422487170 -0.0296249452 -0.0060195119 0.0548710401 0.0118911130 -0.0098557750 0.0042946892 0.0038733804 -0.0156704175 -0.0186641021 0.0041667822 -0.3819526699 0.2347059105 0.1932824203 -0.0258215867 -0.4265573568 -0.0703443672 0.2201777581 -0.1448910623 -0.1068731759 -0.0041925371 0.3152913503 0.0479851159 0.2221003605 0.1437191656 -0.0766436841 0.0081219678 0.0125560699 0.0024651401 0.0027758120 0.0662183605 -0.0042415558 -0.0000686491 0.0006255037 0.0033643747 0.0039844993 0.0224875678 0.0041151520 -0.0010005445 -0.0089993743 -0.0057292508 -0.0050935315 -0.0027705702 -0.0000939189 0.0018221532 0.0008428364 -0.0000074913 -0.0011279705 -0.0002982180 -0.0000172967 0.0000745230 0.0008410052 0.0002353359 -0.0004068584 -0.0007759210 -0.0003329213 0.0047291108 -0.0014636394 -0.0032115965 -0.0036324378 -0.0002471896 0.0014463382 0.0049673453 0.0025416957 -0.0005922954 0.0003743681 -0.0009389405 -0.0031529441 0.0010743840 0.0010675516 0.0018083347 -0.0093133114 -0.0052555361 0.0029547369 0.0045266446 -0.0142325751 0.0011136545 0.0024305650 0.0044941934 -0.0040473271 0.0021766569 0.0022612924 0.0020230461 -0.0012362565 0.0012600372 0.0000212762 0.0006170041 0.0025616889 0.0012955251 0.0106936097 0.0045416179 0.0106103343 0.0004574330 0.0200860851 0.0109470808 0.0043441322 0.0152885847 -0.0055698202 -0.0003695599 0.0048796547 0.0054594960 -0.0065868902 -0.0000159264 -0.0040984740 0.0031553977 -0.0024698089 -0.0015344575 0.0024879143 0.0043616959 0.0062949865 -0.0033981668 -0.0006925725 -0.0020650031 0.0027400919 -0.0042367629 -0.0029599831 0.0097150541 -0.0040514139 0.0057901643 0.0072554896 -0.0066824677 -0.0038844167 -0.0009348741 -0.0006523805 -0.0009434353 -0.0013215350 0.0004274051 -0.0026876448 -0.0053053426 0.0050002351 0.0008071708 0.0024147118 0.0011424354 -0.0008057773 -0.0012906481 -0.0009664581 -0.0015506090 -0.0014428792 0.0000038151 0.0022438742 0.0017054345 0.0004925786 -0.0007531626 -0.0005936824 -0.0008112387 -0.0015471082 -0.0007276447 -0.0014099089 0.0002369287 -0.0008184854 -0.0013002787 -0.0010063092 0.0002925060 0.0007203218 0.0007242860 -0.0034466968 0.0000184867 -0.0002497927 0.0002636694 0.0002312517 -0.0004437550 0.0003531715 0.0000900204 -0.0000644597 -0.0002441885 0.0002366322 0.0003935197 -0.0000590605 -0.0006870075 -0.0006482907 0.0001313435 -0.0000036151 0.0000280939 -0.0033258409 0.0025323076 -0.0005219759 0.0026349907 0.0016228314 -0.0011079696 -0.0034934439 -0.0007173900 0.0008497864 0.0009542968 0.0016262566 -0.0007727450 0.0131722717 -0.0021672576 -0.0012950282 0.0081361499 -0.0117367443 0.0031080092 0.0019660837 -0.0017296494 0.0002653670 0.0001958386 0.0016466411 -0.0006176877 -0.0093622599 -0.0005088840 0.0025506325 -0.0074117778 -0.0094152829 0.0046460735 -0.0006362087 0.0004704483 -0.0013841324 0.0014399826 0.0015800409 0.0007562350 -0.0012922743 -0.0010546147 -0.0013261724 0.0003857273 0.0007921895 0.0000269456 0.0045926477 0.0017810939 0.0065112002 0.0018544186 -0.0041954373 0.0061397066 0.0006002870 -0.0005401414 0.0013829924 0.0003021355 0.0012788910 -0.0005407011 -0.0036137275 -0.0024455217 -0.0036911507 -0.0040606367 -0.0077164685 -0.0002448229 -0.0009759171 -0.0051838986 0.0029886012 -0.0381535979 -0.0113915994 0.0080391000 -0.0018142722 0.0013481305 -0.0311488369 0.0108039237 -0.0150195034 -0.0065535330 -0.0044334528 -0.0050177375 0.0002857955 0.0239726539 0.0147779289 -0.0113787999 0.0105536977 -0.0033339899 0.0176092343 0.0292802914 -0.0032396363 -0.0104055283 0.0846879309 0.0312784063 -0.0440193975 -0.1407286227 -0.0789181649 0.0052419289 0.0202171760 -0.0656524001 0.0281377914 -0.0539762562 -0.0431778920 0.0282300359 -0.0003424748 -0.0173778263 0.0117805535 0.0270515037 0.0351029611 0.0076428165 -0.0118523413 0.0111203475 -0.0277484643 -0.0115358968 0.0181633662 -0.0271473143 0.0092466879 -0.0306204647 0.0292314627 0.0429986778 0.0284163655 0.0028014558 -0.0031491007 0.0018915419 -0.0059186984 0.0061679330 -0.0051270952 0.0001512243 0.0017123590 0.0016403421 -0.0002431991 -0.0019251944 -0.0015855269 0.0013847152 -0.0011999776 -0.0009636298 -0.0002426597 0.0019854470 0.0053499601 0.0048285683 -0.0022212389 0.0042497877 0.0007819690 0.0032950791 0.0069164834 0.0005843895 -0.0021817298 0.0013026297 0.0023225423 0.0008159270 -0.0093374408 -0.0033930954 -0.0033227721 0.0023554157 0.0028097707 0.0033942560 -0.0060012946 -0.0045967201 -0.0100022103 -0.0053768386 0.0026905283 -0.0013012025 0.0096414508 0.0018508398 -0.0007202835 0.0017457330 0.0013424800 0.0039571564 0.0224184989 0.0076399780 0.0038082999 0.0013694447 -0.0024260626 0.0019799923 -0.0057723290 -0.0023969159 -0.0278664560 0.0153327567 0.0278154098 0.0049630117 0.0059942529 -0.0015883213 0.0212710942 0.0121376322 -0.0073932207 -0.0199778759 0.0133269297 0.0104979362 -0.0001458481 -0.0218895313 -0.0034312303 -0.0091813948 0.0050992256 0.0047972732 0.0012183056 -0.0106341145 -0.0020594858 0.0634166435 -0.0395252729 -0.0333304408 0.0046273562 0.0735326644 0.0151535312 -0.0214217590 0.0126794034 0.0100986107 0.0002705987 -0.0390396598 -0.0057892155 -0.0508849683 -0.0325361063 0.0176260472 0.0051080498 0.0028510744 -0.0003746802 0.0014205127 0.0448365420 0.0105652369 -0.0439997045 0.0086638078 0.1100509281 -0.0012822420 0.0001031035 0.0007595491 0.0002736987 -0.0003891376 -0.0000933500 -0.0001303803 0.0000131660 -0.0000579295 0.0000336729 0.0003044478 0.0003738972 -0.0005370859 -0.0006965754 -0.0004720476 0.0001147218 0.0037253565 -0.0010395023 0.0001986415 0.0005211808 -0.0003482855 0.0001832075 -0.0002579324 -0.0003802661 0.0000073258 0.0002392907 0.0002571092 0.0030470138 0.0056131873 -0.0045343027 -0.0001690850 -0.0038880650 0.0032256111 0.0033589329 0.0066506921 0.0068733992 -0.0271628845 -0.0147786656 0.0120597494 0.0109919289 -0.0352995525 -0.0026180054 0.0132547888 0.0027079391 -0.0034856981 -0.0061852761 -0.0053815058 0.0002490302 0.0035967401 -0.0067618435 0.0019804150 0.0006062604 0.0028393788 0.0007894477 -0.0010875099 0.0000362475 -0.0003598097 0.0000846057 0.0020639120 0.0003223621 -0.0000762298 -0.0009430897 0.0003913790 0.0276343664 0.1772650804 0.2146843477 -0.1936575325 -0.0164174199 -0.1358614441 0.0797346442 -0.0826838970 -0.0663434155 0.0828003938 0.1672879523 0.2333208354 -0.1172283538 -0.0273013511 -0.0759190506 0.0897740313 -0.1583234441 -0.1183800538 0.3331334007 -0.1065261878 0.1291629392 0.1455354471 -0.1842728709 -0.0925950166 -0.0043122351 0.0002189481 0.0077585398 -0.1239847205 0.0054576925 -0.1204632257 -0.1684070513 0.1370914963 -0.0006699851 0.0784327699 0.0299858296 -0.0431607292 -0.0217072847 -0.0232013881 -0.0489081261 -0.0467879448 0.0107470543 0.1110446123 0.0506916431 0.0175908310 -0.0225605889 -0.0266643084 -0.0398926763 -0.0791074990 -0.0802641402 -0.0564090120 -0.0057475734 -0.0285686764 -0.0353951437 -0.0632643791 -0.0038964128 0.0031470687 -0.0009145540 0.0620227096 0.0262513804 -0.0284459234 0.0584621315 0.0571589408 0.0382344959 0.0202793481 -0.0168193691 -0.0208696498 -0.0269779916 -0.0009647255 -0.0129104901 -0.0044266571 -0.0065825547 -0.0075232640 0.0135768725 0.0013635189 -0.0036079648 -0.0655760250 0.0494162738 -0.0091425012 0.0339737051 0.0399845423 -0.0230395458 -0.0735037449 -0.0070622223 0.0146517113 0.0260591097 0.0257879155 -0.0141899818 0.2732949466 -0.0356217425 -0.0288529499 0.1545332605 -0.2097127120 0.0550129965 0.0250818538 -0.0394400533 0.0108820715 0.0123110051 0.0293622570 -0.0126984072 -0.0820095894 -0.0311397996 0.0315785386 -0.1200645999 -0.1658940677 0.0805585245 -0.0021690883 -0.0134642168 0.0074542794 -0.0096394977 -0.0129491660 0.0004833334 -0.0070328002 0.0087807585 -0.0200808964 0.0062068799 -0.0035234446 0.0125061244 0.0546138928 0.0431125260 0.0658309589 0.0031069691 0.0115693972 -0.0028994305 -0.0150688908 -0.0117841351 -0.0138984955 0.0122264257 0.0112725555 0.0097804725 0.0365985047 0.0074593453 0.0465743017 0.0073437933 0.0006426860 0.0123666323 0.0015905441 0.0010424886 -0.0009063337 -0.0030821481 -0.0013860072 0.0012068967 -0.0016706691 -0.0067152971 0.0055101025 -0.0088437683 0.0011685192 0.0013775502 0.0014990482 -0.0007984274 -0.0004153026 -0.0048241063 0.0055635985 0.0070097414 -0.0030378944 0.0019439661 -0.0019907328 -0.0055537918 0.0023922080 -0.0032230829 -0.0099172139 -0.0021227804 0.0024749609 0.0113537707 0.0079307090 -0.0027285855 -0.0030843205 0.0073237805 -0.0025785398 0.0084875102 0.0050814822 -0.0034451078 0.0006418626 0.0004687547 -0.0002619709 -0.0037861558 -0.0043623365 -0.0014933146 0.0013179051 0.0003537312 0.0022947123 0.0019558278 -0.0006499448 0.0028057149 -0.0005992170 0.0023098103 -0.0018819157 -0.0071734864 -0.0031038972 -0.0042489023 0.0002080406 0.0001511589 0.0006862759 -0.0014414854 -0.0002385869 -0.0005839317 0.0000598767 -0.0012797445 0.0039203085 0.0018282669 0.0014180798 -0.0023931012 -0.0034982995 -0.0003953309 -0.0047537880 -0.0967814628 0.0597121767 0.1024387025 0.0397919740 0.0806859951 0.0058849070 -0.0350313273 0.0101335187 0.0243099342 -0.0456286038 -0.1034539081 -0.0102703841 -0.0216452331 -0.0029743298 0.0128553509 0.0572724150 0.0233860113 -0.0264784038 0.0183114954 -0.0142474682 -0.0158187015 0.0308598723 -0.0649143931 -0.0472519473 -0.0333610487 0.0998356441 0.0489048726 -0.1664072245 0.1235399528 0.1428195338 0.0105914835 0.3076043713 0.0964650661 -0.0629991962 0.0373681343 0.0572094652 0.0157431807 0.0112191089 -0.0037367658 0.3111622877 -0.2026242661 -0.2952100897 0.1681336392 0.0955865378 -0.0622454230 0.1745130365 0.1065968621 -0.0596966842 -0.1572182230 0.1032107160 0.0816434212 -0.0050059790 -0.2050627706 -0.0265017213 -0.1416738819 0.0884847776 0.0743474452 -0.0158745377 -0.1808110748 -0.0191529815 0.1518595674 -0.0919914775 -0.0858317139 0.0075308158 0.2619707091 0.0433312828 0.0857582224 -0.0626674396 -0.0539992887 -0.0057097360 0.0960617170 0.0173624705 -0.2580399036 -0.1593851329 0.0904387109 0.0206678316 0.0241033687 0.0019497433 0.0079502000 0.1875344563 0.0139626251 0.0035955738 -0.0007326749 -0.0099217603 -0.0021515221 0.0127433849 0.0038790820 0.0071219532 -0.0059317175 -0.0051539378 -0.0047069726 -0.0021893904 0.0002344283 0.0007204825 0.0002505298 -0.0004200851 -0.0003586124 0.0002177429 0.0005733003 -0.0016299493 -0.0018169261 -0.0004840630 0.0006361907 0.0002494806 0.0002562617 0.0004723304 -0.0013136330 -0.0021276384 -0.0012296183 -0.0010514700 0.0010221079 0.0028892976 -0.0010091401 0.0022359058 0.0015863781 0.0002033178 -0.0053613012 -0.0017483866 -0.0029715365 -0.0026641625 0.0247339109 0.0178929666 0.0083292572 -0.0091551989 0.0235423407 -0.0042704867 0.0063054806 -0.0164187663 0.0090387260 -0.0035579491 -0.0028912483 0.0032276999 0.0019050395 -0.0018233775 -0.0039775140 -0.0062909853 0.0021341147 -0.0005840127 -0.0012001620 0.0078628140 0.0108986467 0.0023746525 0.0277503906 0.0084190211 -0.0009228912 0.0123683054 0.0013575387 0.0035554113 -0.0067740362 -0.0064423895 0.0060652833 0.0009833473 0.0048249769 -0.0009649910 0.0012080057 0.0012991347 -0.0039812342 -0.0057949449 -0.0084308710 0.0012118339 0.0020952908 0.0026628501 -0.0011021871 0.0042178716 0.0040520225 -0.0241549061 0.0043016294 -0.0088610237 -0.0124586383 0.0132038480 0.0077814978 0.0051760732 -0.0006533045 0.0016037422 0.0058113149 0.0009465148 0.0062570586 0.0065987926 -0.0033169148 0.0004142094 -0.0068619759 -0.0026870232 0.0037462313 0.0021573106 0.0022344212 0.0044215621 0.0041671773 -0.0009305560 -0.0098266363 -0.0047108164 -0.0017924531 0.0022553616 0.0023399186 0.0034390572 0.0069053741 0.0069000211 0.0049559594 0.0004184188 0.0020517103 0.0029645693 0.0047404452 0.0007841069 -0.0008411705 -0.0013127987 -0.0052980648 -0.0004989661 0.0018504750 -0.0045803360 -0.0047260978 -0.0026582429 -0.0016705188 0.0022449374 0.0026099301 -0.0021861361 -0.0007591514 -0.0030003754 0.0003461883 0.0010659624 0.0016377827 -0.0014457172 -0.0002352425 0.0006459021 0.0067709601 -0.0070218721 0.0019013876 -0.0059928323 -0.0042787748 0.0027881354 0.0095462021 0.0015637820 -0.0021599357 -0.0027661074 -0.0030900873 0.0016260951 -0.0314015692 0.0050133774 0.0028976767 -0.0190446181 0.0270179810 -0.0072121138 -0.0037279764 0.0047838464 -0.0011498406 -0.0014646969 -0.0046205825 0.0019218997 0.0171410646 0.0028072798 -0.0052325469 0.0180333209 0.0238579506 -0.0117467195 0.0004535711 0.0008749866 -0.0000438688 0.0000966847 0.0003175270 -0.0004258884 0.0013477239 -0.0002597410 0.0026382482 -0.0008237685 0.0000357081 -0.0013321467 -0.0072772842 -0.0049354478 -0.0093828297 -0.0011249757 0.0006800911 -0.0024765353 0.0012239098 0.0014761791 0.0007140183 -0.0013159535 -0.0017308780 -0.0006346439 -0.0019397331 0.0004133845 -0.0030270102 0.0012634118 0.0035891864 -0.0010569833 0.0058640428 0.0027336833 -0.0003806051 -0.0396480147 -0.0248291922 0.0214818688 -0.0054772968 -0.0179411677 -0.0120444685 -0.0202370813 -0.0216455931 -0.0125946077 -0.0040966671 -0.0012528530 0.0008819147 0.0210777458 -0.0054782583 -0.0176472972 0.0148048258 -0.0100100424 0.0076404909 0.0338925026 -0.0048773657 -0.0027654714 0.0816375063 0.0261765239 -0.0052634260 -0.1349157329 -0.0635922743 0.0540791852 0.0410922727 -0.0740863402 0.0194474244 -0.0719284598 -0.0684849277 0.0365110279 -0.0275287903 0.0343404672 -0.0147443153 0.0449982506 0.0676761434 0.0078138564 0.0109101098 -0.0277278653 0.0318242101 -0.0455918678 -0.0333371821 -0.0265518928 -0.0241172043 -0.0331655418 -0.0187656566 0.1022930044 0.0057142488 0.1023620363 -0.0088749659 -0.0020904618 -0.0092150919 0.0104106896 -0.0035264302 0.0017318612 -0.0000539546 -0.0012216761 0.0002653407 0.0004527180 -0.0003078981 -0.0003514289 0.0013301088 -0.0004085168 0.0005516417 0.0013970074 0.0004859294 -0.0006021433 -0.0023517062 -0.0020799504 -0.0005972024 -0.0058590914 -0.0060341254 0.0014108051 -0.0050875900 -0.0064726867 0.0007951626 -0.0010422281 0.0108526347 0.0043084185 0.0081057285 -0.0027644641 -0.0060052471 -0.0012408019 0.0062575485 0.0032603700 0.0094596400 -0.0011491479 -0.0055254819 -0.0007999216 -0.0082040271 -0.0030433574 -0.0146462114 0.0064568055 0.0114763269 -0.0015289038 -0.0011650069 0.0000007707 -0.0006139886 0.0022073885 0.0010752818 -0.0012351607 -0.0007025487 0.0005885326 0.0057076932 -0.0062449619 -0.0034228498 0.0065237829 0.0036871678 -0.0024437141 0.0078009300 0.0047753415 -0.0026739086 -0.0071225036 0.0047734826 0.0036932609 0.0000226089 -0.0090609804 -0.0012097210 -0.0060862467 0.0037457054 0.0032346233 -0.0003881178 -0.0076217720 -0.0009304526 0.0106639388 -0.0064495631 -0.0055832313 0.0003076629 0.0149854783 0.0016616463 0.0017665696 -0.0015266957 -0.0017069992 0.0000197987 0.0019783980 0.0003653774 -0.0120758942 -0.0075077694 0.0042932654 -0.0020488397 -0.0007870098 0.0001083035 0.0004434232 -0.0148062636 -0.0044093760 -0.0460774899 0.0222275294 0.1888571080 -0.0004587814 -0.0018508625 -0.0004541457 0.0005627075 -0.0000396161 -0.0002039058 0.0006207976 0.0005658910 0.0001549286 -0.0003388348 -0.0002633560 -0.0003195272 -0.0000263394 -0.0010039921 0.0005128820 -0.0001359950 -0.0014136729 0.0014692839 0.0001721804 -0.0000961457 0.0004626694 -0.0008036831 0.0004885492 0.0006230912 0.0002990283 -0.0004160471 -0.0003473504 0.0039519062 0.0091047133 -0.0061632068 0.0017354411 -0.0027050412 -0.0028239495 -0.0026644302 0.0072470587 0.0053292948 0.0081729319 0.0039545717 -0.0072052258 -0.0043053089 0.0109392807 -0.0049058635 -0.0013984804 0.0021082194 -0.0015431983 0.0023220522 0.0018018509 -0.0002383381 -0.0013577300 0.0033226307 -0.0026262101 -0.0022187745 -0.0021278771 -0.0009920229 -0.0009525289 0.0003137678 0.0002372395 0.0002510420 -0.0006868240 -0.0004833901 -0.0007691784 -0.0001630430 0.0006389874 -0.0723327964 -0.0762503241 -0.1052507976 0.0852743429 0.0062142510 0.0571109668 -0.0458026351 0.0603602847 0.0515823689 -0.0284449102 -0.0838474834 -0.1113504194 0.0862840890 -0.0067845347 0.0263332736 -0.0746183294 0.0997227282 0.0624460178 -0.0596609857 0.0346095451 -0.0167907345 0.0279801809 0.0137252687 0.0002114844 0.0019766434 -0.0006687491 -0.0039557589 0.0613880965 -0.0268706192 0.0352338498 0.1182736785 -0.1343634707 -0.0296507939 0.1414271024 0.0593521305 -0.0637567365 -0.0560655391 -0.0477857709 -0.0810721886 -0.0780961772 0.0131213526 0.1697684315 0.0983998895 0.0346002286 -0.0443849354 -0.0451464416 -0.0615083234 -0.1175888902 -0.1508101834 -0.1062105072 0.0108772666 -0.0437267972 -0.0454262676 -0.0661961901 -0.0054713312 0.0048169756 -0.0005863593 0.0117355687 0.0044040559 -0.0296686790 0.0610586223 0.0608715591 0.0274989039 -0.0107487290 0.0093014440 0.0114782080 0.0101921920 -0.0001858612 0.0040093861 -0.0066410538 -0.0092336104 -0.0104212331 0.0215178780 0.0021917145 -0.0056865132 -0.0584402596 0.0794221151 -0.0250861448 0.0715558914 0.0364609289 -0.0263042834 -0.0864221568 -0.0255539483 0.0239745883 0.0203145284 0.0319480434 -0.0153767566 0.2495247505 -0.0552861199 -0.0169048976 0.1783657284 -0.2640243290 0.0713651256 0.0471504934 -0.0423601978 0.0062356889 0.0055662658 0.0469758532 -0.0177581345 -0.2429987599 -0.0097410502 0.0675370411 -0.1907578020 -0.2368993123 0.1185568073 -0.0211741405 0.0088152554 -0.0401369867 0.0290444694 0.0441443202 0.0055763719 -0.0394458516 -0.0286466904 -0.0437130775 0.0126116575 0.0259121842 0.0004215649 0.1455624885 0.0625953839 0.2053066504 0.0568793755 -0.1249129257 0.1884374008 0.0121129472 -0.0223044170 0.0366991021 0.0128149557 0.0348409065 -0.0081560486 -0.0682677995 -0.0590909111 -0.0561795054 -0.1035589713 -0.2029085847 0.0022562299 0.0004361283 0.0008840852 -0.0000592616 0.0002788883 0.0002668919 0.0004037604 -0.0011921641 -0.0026264597 0.0001465201 -0.0002137590 -0.0000435117 -0.0004880242 0.0011533846 -0.0005591692 0.0000123655 -0.0051655203 0.0083837592 0.0088088990 -0.0018272813 -0.0000088508 -0.0029395563 -0.0093869986 0.0061787069 -0.0063079756 0.1108133320 0.0855644294 -0.0391341828 -0.0769815653 -0.1261262014 0.0543068569 0.0001409554 -0.1153507358 0.0418392831 -0.1081041917 -0.0821081498 0.0604691865 0.0895570392 -0.0113277702 -0.0017283445 0.0678851869 0.0158291913 0.0725450470 -0.0573883988 0.0588382032 -0.1374112237 0.0271813191 0.1070456006 -0.0589792920 0.0601038620 -0.0423261544 0.1314200839 -0.0058792769 0.1003199457 -0.1197182592 -0.0182923611 0.0162163255 -0.0337676934 -0.0302191213 -0.0222407641 0.0083296842 -0.0058237176 0.0001854993 -0.0016070852 0.0092749674 0.0046525810 -0.0051960224 0.0047726320 -0.0031680597 0.0091944707 0.0003711645 -0.0006407242 -0.0056049822 0.0095032393 0.0092214154 -0.0018631887 -0.0032962726 -0.0013773117 0.0015208626 -0.0012543128 -0.0041678034 -0.0011225805 -0.0006551674 -0.0000680362 0.0003786059 0.0024766896 0.0008020038 -0.0012402553 0.0003945590 0.0020203513 0.0005902750 0.0035715947 -0.0022361640 -0.0022896568 -0.0012412163 0.0081018611 0.0028357480 -0.0006263865 0.0023275570 0.0016572068 0.0001345148 0.0014927719 -0.0005132089 -0.0014760034 0.0015669491 0.0019086463 -0.0014002267 0.0012258006 0.0010466554 0.0088779606 -0.0063338978 -0.0092478416 0.0032402981 0.0002479169 -0.0014038084 0.0026111139 0.0015830667 -0.0008918563 -0.0019059045 0.0013616966 0.0009941126 0.0001053957 -0.0028548703 -0.0004029887 -0.0023019409 0.0017812962 0.0012547778 -0.0006600265 -0.0032761196 -0.0001843526 -0.0004308817 0.0004235473 0.0000852616 0.0002138199 0.0061535103 0.0007053647 0.0034264103 -0.0019986616 -0.0020065889 -0.0004594385 0.0044600893 0.0007560737 -0.0023261158 -0.0013877418 0.0008080900 -0.0020891569 0.0020733999 0.0009286596 0.0051685366 -0.0174000238 -0.0142521998 0.0016964381 -0.0165240598 -0.1131653254 0.0006565291 0.0021766863 0.0005991473 0.0033185203 0.0007278115 -0.0008551913 -0.0020282067 -0.0015269887 -0.0003569722 -0.0001179139 0.0001708987 0.0004969330 -0.0028545781 0.0023054468 -0.0022560590 -0.0008173187 0.0020586331 0.0033193521 0.0007559166 -0.0005411172 -0.0003377774 -0.0005117485 -0.0000632452 0.0002030064 0.0001232321 -0.0007083139 -0.0004541939 0.0131357855 -0.0054839086 0.0057131959 0.0032196952 -0.0209559869 0.0111921110 0.0185103946 0.0023562887 0.0084567920 -0.0222178662 -0.0129775848 0.0009327681 0.0061984348 -0.0337507509 -0.0282733462 0.0304050359 0.0154207593 -0.0175104379 0.0004125111 0.0007566247 0.0053347954 -0.0013618929 0.0037312731 -0.0021866364 -0.0061448520 0.0020458793 -0.0006847226 -0.0016197446 0.0031972260 0.0038378700 0.0013765996 0.0055226534 0.0024295657 -0.0021864474 0.0040601608 0.0018544108 -0.0459913034 -0.0230439969 -0.0294223678 0.0307755859 -0.0017702710 0.0135536693 -0.0280389787 0.0331093333 0.0254686596 -0.0030983264 -0.0283264542 -0.0349346636 0.0472108566 -0.0123003791 0.0047866115 -0.0433409226 0.0452775661 0.0210835659 0.0063487360 0.0032311462 0.0001055988 0.0572194096 -0.0391684161 -0.0291792417 -0.0015581321 0.0000275851 -0.0011637764 0.0075781713 -0.0208916857 -0.0055705858 0.0590782143 -0.0876650259 -0.0282742813 -0.1024091664 -0.0501968672 0.0271408058 0.0606317811 0.0421731411 0.0522495260 0.0479547878 -0.0023285161 -0.0856510752 -0.0847325038 -0.0330444867 0.0296533759 0.0366075609 0.0364221272 0.0584058108 0.1241967774 0.0858284833 -0.0379994291 0.0174237213 0.0069939049 -0.0141714316 0.0010182123 -0.0030367598 -0.0016587922 0.0992305562 0.0410092825 -0.0109914323 -0.0114536133 -0.0187502436 -0.0078315013 -0.0032412284 0.0024011421 0.0028137281 0.0030106235 -0.0000534639 0.0011846753 0.0033251409 0.0043595466 0.0048736473 -0.0106319523 -0.0013328002 0.0025077305 -0.0522504271 0.1064230530 -0.0375591512 0.0395596956 0.0507411297 -0.0299134171 -0.1271356585 -0.0067426235 0.0234543410 0.0524835353 0.0038592957 -0.0100869991 0.3059307493 -0.0414671086 -0.0299888411 0.1751839629 -0.2173971516 0.0537295977 -0.0044624635 -0.0624678101 0.0277210498 0.0413548580 0.0558657707 -0.0277467291 0.0266983589 -0.0777889154 0.0141402881 -0.1438978118 -0.2207461042 0.1043808003 0.0139947098 -0.0481386345 0.0625977495 -0.0605186937 -0.1062946419 0.0112229828 0.0147743448 0.0631446086 -0.0292840663 0.0135929380 -0.0468091680 0.0567779789 0.0163596939 0.0771456818 -0.0194235784 -0.0522730020 0.1953422322 -0.2308404605 -0.0763296427 -0.0156446385 -0.1050853952 0.0289647390 0.0011117009 0.0439192106 0.2123223790 0.1002305672 0.2288962282 0.1565882217 0.2574992573 0.0400002354 -0.0011877130 -0.0018337515 0.0000300407 0.0019624451 0.0015352127 -0.0026643810 0.0030825469 0.0067452534 -0.0007997496 0.0039180378 0.0023413304 0.0018376209 -0.0040362165 0.0002016711 0.0009576468 0.0165523469 0.0009176788 -0.0130881236 0.0122893544 -0.0085065971 0.0061847604 0.0150178027 -0.0013495802 -0.0011688949 -0.0005484022 0.0016630157 -0.0005074961 -0.0044000367 -0.0003634964 0.0005913229 0.0007472873 -0.0007923434 0.0001964611 0.0016619489 -0.0020427468 0.0008870076 -0.0010971106 0.0005428653 -0.0004478083 0.0013999077 0.0012727592 0.0002529277 -0.0003441877 0.0004374940 -0.0003671655 -0.0002876760 0.0012416197 -0.0013784918 0.0004497470 -0.0022382046 0.0026225699 -0.0010132689 0.0006315433 -0.0031274403 -0.0011350463 0.0003143339 -0.0002388361 -0.0007912605 -0.0006483565 0.0003400341 0.0030920429 0.0026821600 -0.0050649339 -0.0056609846 -0.0034964694 0.0050122384 0.0007933457 -0.0016705234 0.0049281953 0.0098361083 -0.0158280019 -0.0107596142 0.0029067703 0.0004130366 -0.0023590727 0.0026441377 0.0000811817 -0.0014872760 0.0043790195 0.0050330501 -0.0000827755 0.0008420792 -0.0036563740 -0.0015732945 -0.0058048408 0.0010684321 0.0038955152 0.0003905778 -0.0010437086 -0.0003159960 -0.0003883458 0.0061680989 0.0017490081 0.0003943025 0.0074530725 0.0015233827 0.0146659980 -0.0075131357 -0.0112805485 -0.0023189771 -0.0145729323 -0.0097928365 -0.0057611613 -0.0039937391 0.0017091232 -0.0003165475 0.0093467324 0.0024528221 0.0393901785 -0.0196113380 -0.0242270713 0.0048742426 -0.0036035125 -0.0026380763 0.0002525628 -0.0006302820 -0.0003130707 0.0004861841 0.0006117127 0.0001680038 0.0000453484 -0.0021070497 -0.0001178136 -0.0013380708 0.0027276133 0.0008625021 -0.0011799035 -0.0020671800 0.0000255826 -0.0170425866 0.0116026440 0.0047465977 -0.0003930954 0.0036239480 -0.0005594688 0.0046548342 -0.0008198142 -0.0018003740 -0.0003173200 0.0074380265 0.0030028498 0.0040417735 0.0016576263 -0.0013605744 -0.0013677355 -0.0025840058 0.0000338848 -0.0010579798 -0.0012044613 -0.0041306322 0.0007520255 0.0005404686 -0.0003066802 -0.0354520688 -0.0432751266 -0.0094495513 -0.0685832001 -0.0068290018 0.0238632094 0.0423314049 0.0294718257 0.0045154541 -0.0018487845 -0.0000550904 -0.0004832587 -0.0002199200 0.0002892074 -0.0061838785 -0.0023792318 0.0038321494 -0.0004822586 -0.0040166383 -0.0013112190 0.0018379358 0.0159641450 -0.0071406231 -0.0118445332 -0.0056546548 0.0230819047 0.0164876694 -0.0376108124 -0.0057169060 -0.0109960818 -0.0246277220 -0.0028205918 0.0741524867 0.0541284574 0.0066818502 0.0263937335 -0.0271746946 -0.0125649429 0.0167551772 0.0113289323 -0.0469914085 -0.0046368382 0.0266549618 -0.0028414592 -0.0031813227 0.0170489078 0.0125861788 -0.0225186819 -0.0061495460 0.0044610855 -0.0045701602 0.0195900962 -0.0160761330 0.0004844510 0.0540897945 -0.0723079987 -0.0858626799 -0.0413328861 -0.1304585160 -0.0646106944 0.0697647146 -0.0857278555 -0.0563110749 0.0005504324 -0.0011451506 -0.0005058289 0.0010100749 -0.0000542811 0.0003256861 -0.0005653270 0.0002071430 -0.0000535371 -0.0009914973 -0.0001977270 -0.0005531022 0.0007306321 0.0002485939 0.0005338099 -0.0002572175 0.0004059892 0.0003331462 -0.0022418626 -0.0003725051 -0.0004019294 -0.0007937970 0.0003830415 0.0000841183 0.0022997858 -0.0005066364 -0.0001936175 -0.0018877634 0.0004560457 -0.0006135799 0.0001186954 0.0002147276 0.0000668531 -0.0029794309 -0.0013809297 -0.0002678153 0.0022999548 0.0011894891 0.0018270311 -0.0009475951 -0.0005038670 -0.0009690771 -0.0026094662 -0.0015469548 -0.0006980917 0.0023917754 0.0016165840 0.0013929264 0.0063691482 0.0006849843 -0.0020589409 -0.0011376441 -0.0032016946 -0.0042920156 0.0042453541 0.0019336146 0.0013057850 0.0023841531 0.0003500480 -0.0020440608 -0.0015252602 -0.0019757217 -0.0044060880 -0.0005385269 0.0009017894 0.0012633344 -0.0011424025 -0.0004375768 -0.0011043439 -0.0001354685 -0.0017112859 -0.0028978849 -0.0028649713 0.0001330941 0.0017510036 -0.0004506279 0.0006415152 -0.0001851726 -0.0002421536 0.0002188499 -0.0000806703 0.0005292679 -0.0003711378 0.0000650496 -0.0002288088 0.0002903272 -0.0000758210 -0.0018232395 -0.0002246810 0.0003054293 -0.0000983613 -0.0000162472 -0.0000114353 0.0006445198 0.0000402819 -0.0001443807 -0.0005720053 -0.0003122558 0.0002188531 -0.0009264870 0.0002638351 0.0001808947 0.0001257021 0.0007293753 -0.0003127890 -0.0002642981 -0.0006194515 0.0000453666 -0.0004366698 -0.0001856903 -0.0004200300 -0.0008158644 0.0002874360 -0.0015148659 0.0005279500 0.0000865217 0.0007704685 0.0037201754 0.0024226725 0.0040760841 0.0007134690 -0.0000409660 0.0011739519 -0.0011345234 -0.0009639318 -0.0009327746 0.0007530374 0.0004974834 0.0007522382 0.0036319669 0.0007961612 0.0045718801 0.0009167932 0.0005910702 0.0009358858 0.0832652992 0.0820983215 -0.0100656919 -0.2794647744 -0.1725661089 0.1993132088 -0.1493812550 -0.3758115860 0.0253658413 -0.3189738705 -0.1775785340 -0.1100416685 0.0909521234 -0.0167033799 -0.0209585957 -0.3083063996 -0.0328428877 0.2354620000 -0.2996486302 0.2588615943 -0.0828915377 -0.3366570193 0.0027291486 0.0499355283 0.0067209237 0.0062383223 -0.0028624388 -0.0051224551 -0.0038985692 0.0016267056 -0.0042071796 -0.0031148074 0.0015998791 -0.0050425780 0.0039572697 -0.0018287707 0.0085775085 -0.0066421252 0.0025784022 -0.0064708194 -0.0082416206 -0.0012535753 0.0038404621 0.0062477930 -0.0003730084 0.0033976396 -0.0008791804 0.0050734197 -0.0032859882 0.0044973811 -0.0080041680 0.0008136814 -0.0011006521 0.0050010768 0.0013402758 0.0000316756 0.0010870384 -0.0019660210 -0.0003896769 0.0001104323 -0.0013680507 -0.0015854097 0.0028380970 0.0030629943 0.0020861928 -0.0025262053 -0.0010241274 0.0006497670 -0.0029230173 -0.0624052320 0.0501783917 0.0633180284 0.0021611245 0.0114614775 0.0031316576 -0.0112105690 -0.0007362930 0.0063125318 -0.0161147126 -0.0078963937 0.0078591349 -0.0005473029 0.0040570139 0.0016861134 0.0158277722 -0.0035313934 -0.0109767326 0.0015724197 0.0036016365 0.0010035398 0.0038144253 -0.0134748312 -0.0080985603 -0.0013339654 0.0042721034 0.0023493222 -0.0319051562 0.0167593861 0.0264330800 -0.0043165254 0.0264576868 -0.0012497721 -0.0006191405 0.0022807344 0.0008659687 0.0265881037 -0.0165372742 -0.0112834902 -0.0730033902 0.0619407215 0.0231087804 -0.0098785437 0.0083765590 0.0032920715 -0.0072499705 -0.0056755675 0.0022224568 0.0009882061 -0.0054185786 -0.0001042089 -0.0023882513 0.0124224050 0.0031497835 0.0085098416 -0.0109012025 -0.0050948370 0.0033553278 0.0163312016 0.0010579412 -0.0033430179 -0.0040571862 -0.0101245659 -0.0058394115 -0.0419885082 -0.0100839112 -0.0135223759 0.0025094050 0.0069494087 0.0012954508 -0.0396379889 -0.0065293712 -0.0072691239 -0.0061060950 0.0017302975 0.0042671338 0.0043606529 -0.0000106065 0.0011748890 0.0382335919 0.0093553707 0.0009825553 -0.0001889821 -0.0009658683 -0.0189852338 -0.0074547326 -0.0005706150 0.0389810039 -0.0044257253 -0.0192207158 -0.0092210081 -0.0037576497 0.0010849859 -0.0011009147 0.0000544819 0.0013990103 0.0034384411 0.0059551276 0.0168159066 -0.0041344370 -0.0086367595 -0.0042388915 0.0013143123 0.0023296719 -0.0031595088 -0.0147397730 0.0056900941 0.0103313394 0.0055129845 -0.0185398534 -0.0141819050 0.0643830717 -0.0612058000 0.0785089201 0.0466128036 0.0604412586 -0.1936410952 -0.1472324434 -0.0905797268 -0.1290429119 0.0988568806 0.0675301825 0.0334557958 -0.0354955728 0.1014758541 -0.0086953189 0.0098353318 -0.0496639622 0.0269333196 -0.0247017196 -0.0183922526 0.0139294946 0.0119574630 -0.0228035399 0.0196880011 0.0017422873 0.0199346760 0.0050652230 -0.0517080601 0.0571496336 0.0654304643 0.0348313460 0.1042973268 0.0524587844 -0.0614962634 0.0611077361 0.0494563553 -0.0017126977 0.0002460710 0.0001012422 -0.0003195263 -0.0000562717 -0.0002897256 -0.0005508040 0.0009131943 0.0009303307 0.0013138819 -0.0007282045 -0.0003441562 0.0008885078 -0.0006638597 -0.0003239204 -0.0011201960 0.0008894936 0.0001386153 0.0014401246 -0.0002559540 0.0004225928 0.0038283693 -0.0024826134 -0.0020238276 -0.0034792039 0.0006617718 -0.0001062870 0.0013037732 -0.0011229655 0.0001303414 0.0010358553 -0.0025562739 -0.0007614444 0.0045397269 0.0026130969 0.0012474965 -0.0043289200 -0.0021625724 -0.0017977207 0.0011907827 0.0001430385 -0.0005940472 0.0043695611 0.0024248942 0.0008212338 -0.0034876186 -0.0018677312 -0.0006137065 -0.0110851338 -0.0025660286 0.0049887579 0.0010744497 0.0044415878 0.0078889014 -0.0046123608 -0.0021443858 -0.0010658396 -0.0086973313 -0.0025884002 0.0040676715 0.0004834419 0.0014502398 0.0054985359 0.0006754008 -0.0010902931 -0.0015327200 0.0018576343 0.0006118796 0.0017041774 0.0002721321 0.0018795431 0.0030596314 0.0029976751 0.0000254486 -0.0018348795 -0.0006450128 -0.0034048357 0.0013505804 -0.0018088213 0.0037048919 -0.0011486617 -0.0064267931 0.0030346150 -0.0001228582 0.0036422501 -0.0006189471 -0.0003549885 0.0252981638 0.0007018430 -0.0042307144 0.0061286511 -0.0039309328 0.0004051116 -0.0058787542 -0.0023366291 0.0022062704 0.0042871141 0.0003648836 -0.0009117887 0.0259876253 -0.0067973847 -0.0044157842 0.0042266199 -0.0010163860 -0.0004077032 0.0011701720 0.0031640556 -0.0005468538 -0.0007009671 -0.0052373395 0.0032945992 0.0043053346 0.0001408468 0.0068676059 -0.0025445472 -0.0015055354 -0.0028409545 -0.0175990425 -0.0105967239 -0.0215703753 -0.0042017070 0.0026342985 -0.0091069210 0.0042086583 0.0048631657 0.0024843625 -0.0027602854 -0.0018187607 -0.0027262688 -0.0154331093 -0.0027963380 -0.0209034974 -0.0020757699 0.0001083771 -0.0036563928 0.0743730218 0.0667195626 -0.0175825885 -0.2537871051 -0.1860229390 0.1916789702 -0.1302825980 -0.3611543231 0.1048474247 -0.3701849552 -0.1594784639 -0.0880010700 -0.0654860400 0.0247494027 0.0174813463 0.2590394807 -0.0343379038 -0.2197888612 0.2589386823 -0.2172369517 0.0543812333 0.2708628009 -0.0220999799 0.0055183850 -0.0925481250 -0.0847142825 0.0416455615 0.0575148361 0.0513683372 -0.0171350224 0.0672932439 0.0378410347 -0.0215590690 0.0715974660 -0.0624331467 0.0301261471 -0.1227054139 0.0978592019 -0.0360649290 0.0954309155 0.1170915320 0.0242420671 -0.0606362413 -0.0879368598 -0.0039607155 -0.0451702511 0.0146379378 -0.0706289650 0.0479670749 -0.0590637904 0.1147794306 -0.0158806654 0.0166605805 -0.0754427241 -0.0151924344 0.0006842476 -0.0192477965 0.0306845511 0.0089419481 -0.0042650016 -0.0004819202 0.0007882393 0.0010052310 -0.0003107114 -0.0013361829 -0.0010444455 0.0007458914 -0.0014120444 -0.0011361943 0.0072457365 -0.0039467546 -0.0065161221 -0.0062999508 -0.0034348067 0.0015171977 0.0037254158 0.0041364044 -0.0006839755 -0.0007957430 0.0032680807 0.0018858690 -0.0007275025 -0.0045306255 -0.0009160557 -0.0020783786 0.0009128532 0.0015561356 0.0004896947 -0.0049553395 -0.0021796760 -0.0024722177 0.0019767626 0.0007212892 -0.0015957536 0.0001593457 0.0000227970 -0.0026256102 0.0011500772 0.0027076798 -0.0003217966 0.0106591060 0.0030979980 0.0004636318 0.0003953267 -0.0001370386 0.0016022804 -0.0030702493 -0.0006834606 -0.0129511028 0.0077434255 0.0080872723 -0.0014488983 0.0008668764 0.0004071515 -0.0006004024 -0.0006312589 0.0001382910 0.0002089347 -0.0003909669 -0.0000375819 -0.0002345970 0.0012696591 0.0005286823 0.0006510493 -0.0009515865 -0.0004406932 0.0004812631 0.0015484218 0.0000124130 0.0010383518 -0.0010716081 -0.0013372791 -0.0020072753 -0.0039269813 -0.0036553464 -0.0011165901 0.0001371730 0.0006450433 0.0003843780 -0.0042292148 -0.0005088639 -0.0001106955 -0.0004224916 0.0000250012 0.0015707563 -0.0026467887 -0.0005171176 0.0010768125 0.0446268243 0.0060420040 -0.0210582873 -0.0037431022 0.0020011326 0.0037906096 -0.0051509925 -0.0044889323 -0.0069865546 -0.0015462159 0.0017444926 0.0039899309 0.0029704133 0.0004758961 -0.0000999588 -0.0004523795 0.0001489618 0.0026736440 0.0045757083 0.0065554644 -0.0036360592 -0.0110297227 -0.0057876783 -0.0027535196 0.0018609891 -0.0015438606 0.0004048114 0.0010172297 0.0004923037 -0.0005049791 0.0022503977 0.0015775288 0.0072472644 -0.0449685362 0.0437085884 0.0134043603 0.0369711139 -0.0723916826 -0.0583239132 -0.0551261033 -0.0674162959 0.1170737202 0.0765148995 0.0198090729 -0.0418028205 0.1327467632 0.0188358455 -0.0236436518 -0.0564796930 0.0398199126 -0.0060025634 -0.0052012664 -0.0142636721 0.0054837082 -0.0177357521 0.0253622347 0.0314136794 0.0015491343 0.0061441757 0.0052424890 -0.0102025476 -0.0123834927 -0.0052066346 -0.0181487452 -0.0088856316 0.0080666855 -0.0136946665 -0.0066152717 0.0145795876 -0.0076976740 -0.0092869455 -0.0167840328 0.0115612011 0.0065447684 0.0282912252 -0.0200721899 -0.0094951350 -0.0077806723 -0.0004456625 -0.0038443454 -0.0328491816 0.0164641116 0.0049064377 0.0356457344 -0.0217433104 -0.0024967065 0.0083076833 0.0140767061 0.0168817961 -0.0558148663 0.0579264021 0.0451421836 0.0004675056 -0.0002771144 -0.0010384386 0.0230955181 0.0190080674 0.0292155011 -0.0437282222 0.0756822510 0.0415712661 -0.0422551188 -0.0269121946 -0.0105613315 0.0424046729 0.0230583690 0.0116109676 0.0047127644 0.0051205540 0.0084291420 -0.0437810151 -0.0219333847 -0.0004569790 0.0275175058 0.0129782955 0.0007091647 0.0887062308 0.0441382366 -0.0498482724 -0.0026638550 -0.0180019452 -0.0612622462 -0.0032813187 -0.0001035870 -0.0014259631 0.1090987038 0.0403505125 -0.0380630485 0.0042299372 -0.0052900698 -0.0359301596 -0.0001592357 0.0005814114 0.0009165338 0.0020137728 0.0006354036 0.0018428719 -0.0000474264 -0.0008734335 -0.0010970735 0.0022822547 -0.0002647223 -0.0014855464 0.0061751978 0.0594491300 -0.0233939866 0.0253911285 -0.0543948473 0.0166969598 0.0840252824 -0.0454192141 0.0037932280 -0.0501093778 0.0103701483 0.0041825083 -0.3473221636 -0.0140891467 0.0600680753 -0.0749729935 0.0376826150 -0.0007287217 0.0843967533 0.0301773442 -0.0303735945 -0.0580237340 -0.0016465241 0.0111749250 -0.3832890073 0.0950579107 0.0673048470 -0.0691896719 0.0003039297 0.0123876307 -0.0176821851 -0.0502380260 0.0102190610 0.0103651529 0.0728502225 -0.0445280908 -0.0571672006 0.0028490540 -0.0954312059 0.0369759713 0.0181111557 0.0441567979 0.2402358914 0.1510471518 0.2937597773 0.0546350192 -0.0185996266 0.1055992094 -0.0626378515 -0.0671800287 -0.0409241187 0.0372670826 0.0217636054 0.0394159944 0.2309385028 0.0470410732 0.3046870517 0.0433940528 0.0246846556 0.0504237471 0.0065214111 0.0091330205 -0.0002135584 -0.0246932081 -0.0245008614 0.0267174804 -0.0177876909 -0.0391399435 0.0031228865 -0.0321339218 -0.0272925764 -0.0182121813 -0.0169887634 0.0063992724 0.0043974601 0.0536613997 -0.0079274511 -0.0478155070 0.0538424124 -0.0485191576 0.0103455900 0.0620374008 -0.0048483293 0.0017489160 0.0102565263 0.0290738048 -0.0120141443 -0.0713099256 -0.0006409114 0.0071388107 -0.0048965989 -0.0051713819 0.0023274379 -0.0011944527 0.0003684267 -0.0009922770 0.0036940617 -0.0224329683 0.0088856203 -0.0060698324 -0.0033614771 -0.0059162005 0.0033530816 0.0079223311 0.0009786828 0.0029955273 0.0009405549 0.0030728602 -0.0036243232 -0.0031364845 -0.0017396859 -0.0097521988 -0.0039778149 -0.0092665606 0.0007873796 0.0000925127 0.0022576894 -0.0007237031 0.0009993098 0.0002159491 0.0024721990 0.0006099104 -0.0024406409 -0.0029320966 -0.0010094978 0.0028430221 -0.0002825066 -0.0004034976 0.0018664209 -0.0079190777 0.0012952065 0.0056964253 0.0025624801 0.0025619723 -0.0005049637 0.0009851985 0.0012529051 -0.0001736821 0.0019447876 0.0001146620 -0.0016652462 0.0000509462 -0.0031307550 -0.0010728377 -0.0021088236 0.0018031769 0.0019337856 0.0004713186 -0.0023774176 -0.0012465437 -0.0008648074 0.0005642299 0.0010404389 -0.0003976414 0.0066645393 0.0021148751 0.0033358334 -0.0002831083 -0.0020470251 0.0006858739 0.0022602264 0.0012382370 -0.0017359014 -0.0023161417 0.0018098165 -0.0035066836 0.0083895127 -0.0010286644 0.0287102452 -0.0172169279 0.0031233698 0.0007939459 -0.0017330098 0.0000424416 0.0004146583 0.0006956470 -0.0001504274 0.0025725635 0.0000678604 -0.0015812428 -0.0002539061 -0.0035510051 0.0004285097 -0.0000151792 0.0022673815 0.0000453589 -0.0010840646 -0.0025528706 -0.0001129405 -0.0018335661 0.0033928433 0.0088551608 -0.0046267920 0.0063302789 -0.0078083199 -0.0025204085 0.0043819323 0.0021267576 -0.0002521836 0.0093778437 0.0031844547 0.0030985004 0.0024651784 -0.0008889774 -0.0000031087 0.0006418072 0.0002823457 -0.0014971183 -0.0066718493 -0.0038181396 0.0009980994 0.0015352868 0.0019131099 0.0400161737 -0.0413037602 -0.0352168521 -0.1069472515 -0.0044423612 0.0410241185 0.0496945813 0.0313483258 0.0018499963 -0.0019297878 0.0003607584 0.0018708493 0.0058532358 0.0117863155 0.0264609014 -0.0125884586 -0.0254615933 -0.0144175617 -0.0176501173 0.0046630194 -0.0038216993 0.0216296162 -0.0004132165 -0.0099523094 -0.0118969344 0.0457553634 0.0330537714 0.0825153824 -0.1292358560 0.1429655522 0.0592847213 0.1267200419 -0.2998027505 -0.2319649493 -0.1748231141 -0.2273562055 0.2725525770 0.1842312106 0.0737848985 -0.0971261246 0.2886720088 0.0298268722 -0.0155103116 -0.1420701166 0.0883275350 0.0153683317 0.0057977226 -0.1103802933 0.0046413458 -0.0525722786 0.1148853118 0.1803127020 -0.0254978501 0.0274688327 0.1225598178 -0.1647826486 -0.1943677032 -0.0933146985 -0.3071026816 -0.1493069791 0.1550515844 -0.1955564579 -0.1255896421 0.0004966259 -0.0021161956 0.0030152242 0.0040457238 -0.0014706439 -0.0003658062 -0.0044280689 0.0018437867 0.0001344893 -0.0004908379 0.0003697194 0.0006459145 0.0052255689 -0.0010193544 0.0010939331 -0.0024253301 0.0004287843 -0.0015805892 -0.0093126076 -0.0019431922 -0.0051459561 0.0028527348 -0.0039270110 -0.0053467053 -0.0002915228 -0.0008468879 -0.0011437305 -0.0128302096 -0.0015204507 -0.0052752554 -0.0033991395 -0.0023139453 -0.0002327643 0.0006915594 0.0000406368 -0.0011442249 0.0007001474 0.0006285879 0.0010980935 -0.0013481971 -0.0003040635 0.0010426119 -0.0005091162 -0.0006656580 -0.0014402535 0.0015016657 0.0007678772 0.0003084321 -0.0044179634 -0.0008999131 -0.0003179459 -0.0038280909 -0.0023029538 -0.0050026468 0.0007366387 0.0001739257 -0.0002050352 0.0001650618 -0.0008409593 -0.0017455938 -0.0020953365 -0.0018692089 -0.0048605065 -0.0000702190 0.0003357861 0.0002947121 0.0003777171 0.0001028225 0.0004208500 -0.0000694988 -0.0001246857 -0.0002106754 -0.0002497268 0.0000290749 0.0001680435 -0.0058245744 -0.0281753188 0.0121910503 -0.0086443747 0.0273908434 -0.0098999206 0.0021208558 0.0032035144 -0.0014113571 -0.0027271471 0.0126968573 -0.0043749424 0.0566768539 -0.0020463696 -0.0093868580 0.0157569514 -0.0204624893 0.0049554692 0.0040369256 -0.0047465428 0.0014217581 -0.0020970258 -0.0104861397 0.0042218077 0.0489565192 -0.0108073085 -0.0077392499 0.0112719243 0.0068674138 -0.0043118886 -0.0009519364 -0.0015372233 -0.0001949512 -0.0005120195 -0.0011000507 0.0001322938 0.0038181228 0.0011862402 0.0055255736 -0.0017497338 -0.0000241801 -0.0027046165 -0.0091176882 -0.0050435774 -0.0117396018 -0.0026536593 0.0025013039 -0.0065055159 0.0030796776 0.0034342065 0.0019484825 -0.0027494093 -0.0033859823 -0.0014985351 -0.0056719546 0.0001985244 -0.0086481836 0.0012882818 0.0049689579 -0.0023468469 -0.0290840914 -0.0000704486 0.0196976061 0.0833054358 0.0170919745 -0.0018173920 0.0083156803 0.1046686684 -0.1168697273 0.1804800721 -0.0417744511 -0.0517350816 -0.0288403586 0.0124529043 0.0060315432 0.0485817609 -0.0019047979 -0.0502445822 0.0538161121 -0.0389183768 0.0317615003 0.0272369778 -0.0060793255 0.0185347023 0.0163340201 0.1578488278 -0.0644974525 -0.5252171574 0.0713104652 0.0291277792 -0.0264693320 0.0258281501 -0.0074967380 -0.0073754119 -0.0050329773 0.0015571201 -0.0368898635 -0.1448885509 0.0587635305 0.0190069166 0.0396674763 -0.0099956799 -0.0253222268 -0.0349951462 0.0179672081 -0.0134229626 0.0061374676 -0.0220928016 0.0181889566 -0.0197612980 0.0389258890 0.0011552384 0.0080927630 -0.0200652042 0.0007278335 -0.0029099983 0.0004972359 0.0306521364 0.0196853340 -0.0067724296 0.0021380550 0.0019639116 0.0011187422 -0.0027681911 -0.0025983872 0.0012514282 -0.0007231355 0.0008227114 -0.0037681529 -0.0026829956 0.0035101678 0.0086680599 0.0033412482 0.0018074128 -0.0016597823 -0.0032780777 -0.0038434147 0.0006651365 -0.0005024219 -0.0022175030 -0.0003447988 0.0005841354 0.0057959493 0.0013277795 0.0027275681 -0.0022281032 -0.0024314695 -0.0007161029 0.0057959360 0.0026177831 0.0019680578 -0.0028523369 -0.0009474415 0.0023269487 -0.0056245470 -0.0007301442 -0.0001231094 -0.0012562855 -0.0004594859 -0.0002415152 -0.0114592718 -0.0039918462 0.0008466984 0.0002098304 -0.0015739388 0.0010380852 -0.0020459429 0.0010290224 -0.0055975641 0.0037884647 -0.0066709512 -0.0006143903 0.0007894884 0.0002470386 -0.0018952694 -0.0007761812 0.0007101285 0.0008739396 -0.0003778656 -0.0003021413 0.0000238017 0.0010216697 -0.0000952226 0.0002654018 -0.0000773468 -0.0000704040 0.0003138294 0.0003264564 0.0000135416 -0.0034954191 0.0023596019 -0.0011509910 0.0006579062 -0.0094835350 -0.0002450790 0.0022613488 -0.0013606761 -0.0008154708 0.0003552408 0.0041084136 -0.0002213502 0.0038753406 0.0028512079 -0.0012778672 -0.0004855210 0.0023037719 0.0000998778 -0.0023829611 -0.0338360136 -0.0014186254 -0.0097170173 -0.0003940506 0.0053593839 -0.0171379728 0.0204085247 0.0170937021 0.0488065319 0.0023719746 -0.0185404846 -0.0236410695 -0.0147959076 -0.0005889066 0.0009335287 -0.0012256760 -0.0017693383 0.0000798238 -0.0028592437 -0.0099580868 0.0021309337 -0.0018287935 -0.0021062553 0.0076995730 0.0002802699 0.0003410608 -0.0093821651 -0.0000912032 0.0041676270 0.0058622737 -0.0219495875 -0.0158382765 -0.0544119606 0.0346274654 -0.0473123427 -0.0273712739 -0.0369750618 0.1221639150 0.0884133029 0.0522769246 0.0739431153 0.0242530538 0.0127056056 -0.0097387461 -0.0079404990 0.0416844805 0.0218543695 -0.0366185296 -0.0130524877 0.0187062762 -0.0245413450 -0.0163665791 0.0514069058 0.0085278757 0.0021489540 -0.0385671740 -0.0733813901 0.0206710783 -0.0085764443 -0.0610327142 0.0784262949 0.0920849333 0.0452728390 0.1495131861 0.0721457796 -0.0753802567 0.0920437740 0.0611294350 0.0228525781 -0.0134354261 0.0241449153 0.0492757421 -0.0171829811 0.0004144011 -0.0431457499 0.0135492080 -0.0060469048 -0.0078181417 0.0077201691 0.0068491020 0.0439298594 -0.0072925214 0.0100691700 -0.0249932108 0.0061263068 -0.0103272098 -0.1342336611 -0.0183407135 -0.0688335881 0.0009683650 -0.0339723107 -0.0389588132 0.0004454637 -0.0004751205 0.0007953912 -0.1029969042 -0.0062857818 -0.0474622279 -0.0098277883 -0.0295063286 -0.0157287717 -0.0195158347 -0.0128022488 -0.0069752527 0.0209092769 0.0113146138 0.0056512286 -0.0001759996 0.0022508340 0.0068356030 -0.0206889620 -0.0110108570 -0.0021911229 0.0150711872 0.0070300396 0.0000215176 0.0417290979 0.0191179884 -0.0253383632 -0.0041550602 -0.0118368053 -0.0346335615 -0.0001172753 0.0009521158 -0.0001913802 0.0511927969 0.0186477253 -0.0204797602 0.0002306317 -0.0031534235 -0.0229573266 0.0012608939 -0.0019537079 -0.0028370255 -0.0003946920 -0.0002503327 -0.0006347657 -0.0002033372 -0.0012097102 -0.0016977976 0.0005279152 -0.0001468080 -0.0002108227 -0.0328325444 -0.2941252817 0.1244910439 -0.0487540607 0.2588516588 -0.0997447200 0.1367294996 -0.0089336148 -0.0169040474 -0.0967237153 0.1480864214 -0.0403785610 0.2200858691 -0.0292167222 -0.0381611487 0.0572045987 -0.1486819437 0.0454305850 0.1445923010 -0.0158490394 -0.0198119578 -0.0909383382 -0.1162662496 0.0591336444 0.1127241214 -0.0089808590 -0.0134614153 0.0345461739 0.0665333231 -0.0281326654 -0.0035166999 -0.0047387527 -0.0047816260 0.0035638041 0.0165512238 -0.0073795810 -0.0308969452 -0.0026573098 -0.0459610815 0.0189359152 0.0017455877 0.0285598971 0.0999179218 0.0655754536 0.1252465603 0.0210374781 0.0024941068 0.0362047997 -0.0328627680 -0.0295727029 -0.0257918292 0.0190957414 0.0157264925 0.0164931677 0.0947420272 0.0192948528 0.1229142709 0.0216828150 0.0161660805 0.0210472232 0.0093677538 -0.0040889131 -0.0085072343 -0.0242669981 0.0042198247 -0.0117134538 0.0030023193 -0.0306663731 0.0519001241 -0.0660434143 0.0311850425 0.0315035620 0.0184768004 -0.0072251058 -0.0038037625 -0.0470781858 -0.0011144768 0.0414375962 -0.0496096983 0.0327262569 -0.0264206381 -0.0255010014 0.0052202918 -0.0107370072 -0.0305969576 -0.0251275495 0.0132819095 -0.0061115886 0.0231673323 -0.0036193602 0.0182710337 0.0159597956 -0.0081127716 0.0150590265 -0.0239169492 0.0257548846 -0.0228709633 0.0320594110 -0.0134906821 0.0005469902 -0.1085091176 0.0979058546 -0.0072140359 -0.0186370855 0.0079354060 0.0247138383 0.0333612657 0.0033432511 0.0355785615 0.1309421388 -0.0770091452 0.3439496653 0.1684289502 0.3407711190 -0.0176032725 0.0118342775 -0.0314593263 0.0048016758 -0.0004103655 -0.0009949970 -0.0048633947 -0.0000265037 0.0016466274 0.0062460698 0.0022388144 -0.0050926453 0.0021591646 -0.0019232775 0.0012971944 0.0274005418 -0.0196665547 -0.0304764960 -0.0056148495 -0.0059987892 0.0016155672 0.0053781276 0.0037422870 -0.0020403246 0.0034948593 0.0046914697 -0.0009269085 -0.0007744247 -0.0060439926 -0.0013507588 -0.0058195407 0.0028566405 0.0045006159 0.0004872101 -0.0070185151 -0.0028271631 -0.0019186412 0.0064773351 0.0024011648 -0.0023279338 0.0045305213 0.0003023183 0.0068406844 -0.0023788498 -0.0044971290 -0.0005089656 0.0051765163 0.0007576680 -0.0001617669 0.0013523410 0.0013701240 -0.0046983913 0.0006955089 0.0025290017 0.0004909070 -0.0042789385 0.0052445785 0.0011366178 -0.0016560932 -0.0009358614 0.0019537776 0.0009078682 -0.0006894312 -0.0009529014 0.0010839014 0.0005861791 0.0005926652 -0.0017512259 -0.0004239592 -0.0014073929 0.0013691568 0.0007927546 -0.0002568851 -0.0020358654 -0.0002643382 0.0025771250 -0.0011193515 0.0001967607 0.0006595038 0.0112926318 0.0018978164 0.0008057964 -0.0000049979 -0.0007726814 0.0000086781 0.0008892556 0.0007183823 -0.0009590627 -0.0009032539 0.0002845327 -0.0006116294 -0.0042153368 -0.0002305486 0.0033048168 0.0329435539 -0.0017174245 -0.0045938235 -0.0261505730 -0.0368345686 0.0136637682 -0.0200415793 -0.0153163559 -0.0371634320 -0.0023498556 0.0133141491 0.0193219260 0.0126298205 0.0010004066 -0.0003825326 -0.0010621254 -0.0012765747 -0.0089781704 -0.0105018826 -0.0120616952 0.0051549305 -0.0014443353 0.0011898894 -0.0021204467 -0.0001209407 0.0007975203 0.0057128167 0.0012283373 -0.0018180154 -0.0042669279 0.0170200795 0.0120310403 0.0104293639 0.1108376516 -0.0951519543 -0.0180336023 -0.0880226004 0.1263585533 0.1133852700 0.1243664187 0.1466209679 -0.0193313792 -0.0225972429 -0.0539010857 0.0054251761 0.0137293645 0.0489008831 -0.0733068990 0.0302931486 -0.0029520717 0.0066890593 0.0038711834 -0.0158189573 -0.0015171574 -0.0013053926 0.0033025534 0.0156502871 -0.0089497484 0.0011673151 0.0467813295 -0.0633005180 -0.0749758702 -0.0349108131 -0.1201144101 -0.0559836005 0.0572204922 -0.0745370891 -0.0461542384 0.0038378680 -0.0051794493 -0.0077253672 -0.0087984269 0.0067787849 0.0041622990 0.0143188840 -0.0085989981 -0.0032230720 -0.0044399518 -0.0022420820 -0.0045700258 -0.0155827477 0.0081661691 0.0024667912 0.0169240371 -0.0085027443 0.0003765905 0.0096691563 0.0088761655 0.0107040495 -0.0254396126 0.0281066281 0.0232057967 0.0023033090 -0.0004299845 -0.0004006845 0.0158483623 0.0090431116 0.0161775354 -0.0180386472 0.0336138302 0.0206172240 0.0244681635 0.0228472214 0.0311228500 -0.0506284770 -0.0335851892 -0.0366456839 0.0232093530 0.0040169840 -0.0186762879 0.0527993176 0.0365500620 0.0333175967 -0.0643892173 -0.0365778771 -0.0245363574 -0.0350721103 -0.0088910103 0.0532545093 0.0797554527 0.0795225697 0.1553619807 -0.0013876470 -0.0038408161 -0.0002390487 -0.0681662492 -0.0113982834 0.0703247869 0.0647661878 0.0625633384 0.1616082632 -0.0007381070 0.0011112415 0.0016509648 0.0000103308 -0.0000778054 -0.0000989538 0.0003268958 0.0024667300 0.0033060351 -0.0047566866 0.0001752445 0.0021218841 -0.0040160643 -0.0031197782 0.0023756425 0.0125806715 0.0038813417 -0.0053403268 0.0512184906 -0.0189403099 -0.0007669148 -0.0284894463 0.0173357845 -0.0019680082 -0.1292489080 -0.0069022704 0.0212111805 -0.0310132930 0.0131535537 -0.0000494359 0.0499012648 0.0111026197 -0.0137405839 -0.0360474431 -0.0132945330 0.0115880445 -0.1644640804 0.0445394166 0.0331550704 -0.0219702599 0.0151693423 -0.0010865399 0.0758307194 0.2312033449 -0.0799734007 -0.0452813880 -0.2543835094 0.1576166027 -0.0864136572 -0.0348685756 -0.1140234831 0.0376479863 -0.0882924631 0.1270343550 -0.0453136243 -0.0057243978 -0.0500561937 -0.0102013763 0.0713471773 -0.0578407641 -0.0932494322 -0.0368296477 -0.1109394280 0.0842665655 0.1452854394 0.0150951830 -0.0813765740 -0.0499034968 -0.1140613066 -0.0329729595 -0.0985445359 0.0264336259 0.0001432027 0.0126272781 0.0052199136 -0.0042552444 -0.0333723904 0.0392838800 -0.0171938998 -0.0134529802 -0.0301671277 0.0129240566 -0.0533368683 -0.0439627124 -0.0310352566 0.0112883416 0.0088117371 0.0917867374 0.0046481235 -0.0746331603 0.1053548429 -0.0930082203 0.0208023712 0.0824853529 0.0069224510 -0.0110352477 -0.0029461487 -0.0056217191 0.0025146588 0.0109454874 -0.0007698274 -0.0006648463 0.0033184693 -0.0003283270 -0.0002099767 0.0024503842 -0.0033218974 0.0030914950 -0.0011423506 0.0069297631 -0.0029336727 -0.0026564283 -0.0162959545 0.0106315419 0.0024076077 0.0020011194 0.0014885692 0.0047885951 0.0047489405 0.0021233656 0.0026612735 0.0154048213 -0.0114830284 0.0391962227 0.0195310351 0.0391319328 -0.0024730323 0.0016583285 -0.0033758491 -0.0011912379 -0.0011863385 0.0002464156 0.0013210423 0.0019931239 -0.0029005326 -0.0027617087 -0.0027314468 0.0032743999 0.0003501483 -0.0008168902 0.0028297513 -0.0375277390 0.0286361969 0.0363152410 0.0121446596 0.0121192295 -0.0025688174 -0.0090715353 -0.0057524594 0.0034685461 -0.0065053154 -0.0079633084 0.0021100482 0.0017902476 0.0066635234 0.0009058977 0.0081597326 -0.0029547308 -0.0060336572 0.0004646918 0.0102944756 0.0033210984 0.0022625391 -0.0085878206 -0.0030103724 0.0029509421 -0.0001664942 -0.0000897721 -0.0050191747 0.0026915224 0.0034239221 0.0027457311 -0.0044553100 0.0005729034 0.0010240356 -0.0015164213 -0.0025121742 0.0065574298 -0.0026614255 -0.0034995017 -0.0063314082 0.0083202419 -0.0050845859 -0.0026530457 0.0024894466 0.0017641506 -0.0031617680 -0.0016593675 0.0010135369 0.0022572697 -0.0014958049 -0.0012968401 -0.0010500424 0.0028566881 0.0011891980 0.0018360808 -0.0016279472 -0.0011174019 0.0004688444 0.0027990149 0.0003393549 -0.0029815217 0.0017862034 -0.0005005101 -0.0040175042 -0.0183060640 -0.0093388476 0.0008426651 -0.0009577404 0.0007008002 0.0002272261 0.0006121526 -0.0007366398 0.0039362246 0.0027158298 -0.0011273648 0.0000466457 0.0065378255 0.0003696948 0.0008347543 -0.0459595504 0.0016502158 -0.0002189441 -0.0023716001 -0.0021940690 -0.0226882015 0.0362233140 0.0266928836 0.0566814687 0.0014424519 -0.0212408712 -0.0307109904 -0.0197448034 -0.0014747797 -0.0003477283 0.0011751928 0.0022697803 0.0149451012 0.0220766985 0.0224846529 -0.0271079237 -0.0064373241 -0.0087188520 0.0099774095 0.0024691784 -0.0041660863 -0.0073567711 -0.0027979568 0.0013935671 0.0065841075 -0.0265148250 -0.0185479282 -0.0025424941 -0.2135407733 0.1866029221 0.0409341563 0.1528246317 -0.2447602567 -0.2122337641 -0.2361424035 -0.2774084653 0.2110727989 0.1782863722 0.2223688990 -0.0702882319 0.0913070881 -0.1749802287 0.2713959736 -0.1766987025 0.0505590566 -0.0595930853 -0.0411572447 0.0795260023 0.0244612982 -0.0271845551 -0.0239808858 -0.0846498851 0.0495865658 -0.0040357091 -0.0763364207 0.0995851565 0.1174219426 0.0561271302 0.1955539911 0.0914327979 -0.0919839971 0.1171151765 0.0747526492 -0.0009839391 0.0005135367 -0.0006104447 -0.0028231791 0.0010225221 0.0001800528 0.0024765716 -0.0011539593 0.0003674669 0.0011627984 -0.0005029195 -0.0001888978 -0.0027003763 0.0008481281 -0.0000583142 0.0026340632 -0.0019974317 -0.0005155470 0.0083730261 0.0014135794 0.0039737110 -0.0004477749 0.0035164566 0.0018814320 -0.0048540556 0.0003191014 -0.0012275531 0.0026836750 0.0004474470 0.0027894447 -0.0041907713 0.0062292456 0.0030377648 0.0016326487 0.0019111369 0.0028178608 -0.0041883199 -0.0031016533 -0.0033706503 0.0010978146 0.0001779467 -0.0013822457 0.0051421074 0.0033088967 0.0026984644 -0.0057708139 -0.0033248672 -0.0028517193 -0.0036084293 0.0009901621 0.0043863813 0.0085119623 0.0070849879 0.0146710107 0.0028109584 0.0007967903 0.0002874559 -0.0064053758 -0.0009586794 0.0059827441 0.0059285639 0.0051126499 0.0137672113 0.0007791865 -0.0009647558 -0.0015096585 0.0028982994 0.0009626616 0.0027673808 -0.0001897092 -0.0007291684 -0.0012503578 -0.0023629552 -0.0000193645 0.0014374542 0.0000749924 0.0095365226 -0.0038307601 0.0022899987 -0.0075893305 0.0026091078 -0.0003150559 -0.0015006373 0.0005946645 0.0007250068 -0.0027423513 0.0009139595 -0.0163588749 -0.0000299320 0.0028916370 -0.0032771975 0.0042863362 -0.0010750138 -0.0001356440 0.0012062080 -0.0004643599 -0.0002164561 0.0023742523 -0.0008083062 -0.0182679586 0.0040536076 0.0036446907 -0.0028705598 -0.0008839552 0.0008313742 0.0093866968 0.0296369525 -0.0106153915 -0.0066117780 -0.0336903767 0.0199135255 -0.0090212125 -0.0044280818 -0.0114044764 0.0035269076 -0.0108183910 0.0138562202 -0.0116055759 -0.0046472730 -0.0133006190 -0.0021499094 0.0076675267 -0.0080006164 -0.0095640088 -0.0027398716 -0.0121811154 0.0094435391 0.0171717369 0.0010444221 -0.0162154224 -0.0076019862 -0.0222610178 -0.0052892067 -0.0133991701 0.0021304095 -0.0046173760 -0.0261934151 -0.0077514177 0.0209301562 0.0721663299 -0.0818993333 0.0368387901 0.0438201960 0.0443377486 0.0006249088 0.1044560737 0.0835956579 0.0626782981 -0.0239263103 -0.0171958956 -0.1872761991 0.0063862095 0.1588910901 -0.2138570984 0.1891044768 -0.0392221223 -0.1862989523 -0.0028443539 0.0109576335 -0.0028299959 -0.0049068816 0.0005806965 0.0062987506 0.0028183161 -0.0026731872 0.0001358762 0.0032937933 -0.0010360368 0.0009649523 0.0009057048 -0.0004220672 -0.0031797266 0.0013586263 -0.0001500885 0.0029059791 0.0047027927 0.0004066251 -0.0026052968 -0.0043277358 -0.0000855066 -0.0023733371 -0.0009391389 -0.0023156312 0.0014120797 -0.0017898983 0.0037123101 -0.0026414821 -0.0013934496 -0.0035230767 0.0004741813 -0.0002426927 -0.0009381030 0.0020910657 0.0009293880 -0.0007699275 -0.0043635492 -0.0033712241 0.0089413499 0.0079180700 0.0032910153 -0.0067073055 -0.0035058825 0.0040225031 -0.0102788516 -0.3794719665 0.2673614684 0.4064607532 0.0430031583 0.0747096767 0.0021947450 -0.0551611514 -0.0122832171 0.0287079014 -0.0557826047 -0.0469176425 0.0213450761 0.0034289059 0.0206544396 0.0038237144 0.0672851282 -0.0147644134 -0.0463474489 0.0040287232 0.0314590945 0.0096399907 0.0115251491 -0.0676882908 -0.0278207985 0.0037555115 0.0281625121 0.0130440719 -0.1105380717 0.0617194855 0.0875116289 0.0015964029 0.0833939207 0.0232514714 -0.0094340166 -0.0114055643 0.0030547831 0.0858121053 -0.0125499452 -0.0583143004 -0.0568867110 0.1039873351 0.0460530345 -0.0192595982 0.0278509095 0.0126866210 -0.0152544591 -0.0106259648 0.0048230587 0.0022833857 -0.0171472923 -0.0032905685 -0.0099435844 0.0242162740 0.0083739548 0.0253665726 -0.0306052516 -0.0152281280 0.0056994905 0.0444192461 0.0040427257 0.0013898326 -0.0185282548 -0.0022521049 -0.0157386079 -0.1145787097 -0.0207612268 -0.0642279977 0.0255244706 0.0325863782 -0.0004656968 -0.1065713685 -0.0152516688 -0.0396030618 -0.0269226724 0.0127211862 0.0125496794 0.0364096324 0.0017822084 0.0029650344 -0.0643569869 0.0321337881 -0.0003244692 -0.0001404817 -0.0008204301 0.0132985034 -0.0091040422 -0.0082568788 -0.0434778498 -0.0071957696 0.0142105649 0.0199039103 0.0126718603 0.0005993530 -0.0017055308 0.0002770843 -0.0002298427 -0.0026360640 -0.0081954493 -0.0134051691 -0.0256597514 0.0173793744 0.0016149855 0.0159203117 -0.0073903088 0.0065314650 0.0094805956 -0.0004024050 -0.0053987139 -0.0065310131 0.0199474502 0.0139212555 -0.0438865009 0.0711972865 -0.0770401636 -0.0342002536 -0.0505893524 0.1436672244 0.1060412772 0.0926035408 0.1142378957 -0.0044403089 0.0459478829 0.2083041726 0.0105084695 -0.1826731705 -0.2142256981 0.3502453647 -0.0902589948 -0.0195978447 0.0021158171 0.0102639704 0.1087360786 -0.0128819506 0.0688084042 -0.1594952680 -0.2042208422 0.0042754785 -0.0381311245 0.0659899914 -0.0714380713 -0.0813363600 -0.0359634340 -0.1345096364 -0.0500008975 0.0615748113 -0.0698806039 -0.0502252563 0.0031485812 0.0049924500 0.0063529697 0.0049596810 -0.0043733749 -0.0018570299 -0.0069255037 0.0020590678 -0.0002459357 0.0009819345 0.0037969669 0.0048576771 0.0049264885 -0.0031056000 -0.0012694618 -0.0058224831 0.0003819385 -0.0021002044 -0.0056477300 -0.0016393586 -0.0104480483 0.0040835855 -0.0042572948 -0.0099863564 0.0036903244 -0.0013821898 -0.0013220834 -0.0124974488 -0.0027374497 -0.0093419209 0.0064537110 -0.0111877550 -0.0109297781 -0.0004482190 -0.0002531563 0.0001148471 0.0003140455 0.0001648131 0.0000928947 0.0005666705 0.0001394422 -0.0003055236 -0.0004381428 -0.0001333467 0.0007004114 -0.0003486833 -0.0003183504 -0.0001049543 0.0014876303 -0.0005251152 -0.0001190626 -0.0000035878 0.0005367973 -0.0003136139 0.0013066123 -0.0003643274 -0.0016859364 0.0014518252 0.0018269496 -0.0002410387 0.0009740701 0.0009360636 0.0018392052 -0.0005619533 0.0014022707 0.0019121339 -0.0022461035 -0.0007594679 -0.0018900673 -0.0000919997 0.0003944389 0.0005472291 -0.0010714637 -0.0000789043 0.0008968180 0.0004017541 -0.0018589607 0.0008306300 0.0007377438 -0.0004418593 0.0000326378 0.0048376989 -0.0008490124 -0.0004545268 -0.0024094903 0.0006751170 0.0001374486 -0.0114611433 0.0003798882 0.0015763899 -0.0044342378 0.0038358808 -0.0006674239 0.0033356731 0.0014236733 -0.0012561183 -0.0026851931 -0.0010784643 0.0008787872 -0.0098481339 0.0033389625 0.0014518243 -0.0008659772 0.0022301347 -0.0006463786 -0.0011183656 -0.0042756556 0.0017410750 0.0014923122 0.0063476521 -0.0032942085 -0.0009449273 0.0001958009 -0.0016052997 0.0006404884 0.0016909874 -0.0002697397 0.0084017667 0.0045045590 0.0101688503 0.0019523760 -0.0019934825 0.0045302551 -0.0006611808 -0.0017191937 0.0003886553 0.0001312119 -0.0008703110 0.0008599647 0.0074464242 0.0016029377 0.0101623720 0.0009964187 0.0006141045 0.0011093124 -0.0113265516 -0.0043591068 0.0078539071 0.0266400826 0.0254338724 -0.0169770054 0.0044417145 0.0404958591 -0.0462101038 0.0730870322 0.0030236458 -0.0038160736 -0.0101341646 0.0043275989 -0.0000568699 0.0086353646 -0.0060601895 -0.0161507321 0.0198448262 -0.0114972372 0.0127967768 0.0172721682 -0.0055176015 0.0077720212 0.0032640746 0.0039610422 -0.0004817835 -0.0015117865 -0.0056701193 0.0029052056 0.0020284934 -0.0055667546 0.0017101501 0.0025232673 -0.0003665243 -0.0002596086 0.0025490682 0.0004818746 -0.0002373743 -0.0024059713 -0.0005676997 -0.0028577915 0.0002354744 0.0049867496 -0.0039227802 0.0005077193 -0.0017653264 0.0020466026 -0.0032286583 -0.0017263651 -0.0019300943 -0.0086721443 -0.0051149653 -0.0059757362 0.0023842661 -0.0005330258 0.0017941402 -0.0012174492 0.0004022908 0.0013858984 -0.0047391926 -0.0033745318 0.0034618780 0.0074302636 0.0033543446 -0.0054329628 0.0005260742 0.0008282108 -0.0023237707 0.0564818739 -0.0388607726 -0.0601272320 -0.0087608595 -0.0124977197 0.0004580015 0.0093498956 0.0032424826 -0.0044597417 0.0070906492 0.0085004087 -0.0015146695 -0.0005684410 -0.0043881576 -0.0009678440 -0.0104887161 0.0021880741 0.0071707270 -0.0002612467 -0.0058954472 -0.0020572348 -0.0028482885 0.0105535674 0.0047006822 -0.0008060975 -0.0057882485 -0.0026117410 0.0151289608 -0.0088104914 -0.0122954474 0.0001037922 -0.0081424615 -0.0016986436 0.0023255939 0.0007719701 -0.0018591756 -0.0117238745 0.0001056855 0.0085533543 0.0023973960 -0.0118350573 -0.0052682788 0.0009156779 -0.0031687570 -0.0009866911 0.0000316976 0.0004565820 -0.0000423925 0.0024255912 0.0017458561 -0.0008727052 0.0007637233 -0.0024301797 -0.0000312912 -0.0026933272 0.0044805261 0.0016385163 -0.0007338253 -0.0060017641 -0.0005418095 -0.0039935601 0.0061679618 0.0021795381 -0.0038741471 0.0061082226 -0.0093351140 0.0111894313 -0.0042359324 -0.0050998082 0.0004911053 0.0206572534 0.0031811283 0.0113448732 0.0076681813 -0.0035738525 -0.0013270053 -0.0062804535 -0.0007823552 0.0012973181 0.0277749171 0.0023520060 0.0016683930 0.0007490628 -0.0012707549 -0.0022093273 0.0008298378 0.0031375296 0.0029533022 -0.0014453158 -0.0023871837 -0.0015237584 -0.0000492870 0.0013131538 -0.0016267274 -0.0036738630 -0.0056422267 -0.0109829184 -0.0161265872 -0.0196341221 -0.0193514880 -0.0335868235 -0.0168710843 0.0209054193 0.0109424190 -0.0101018824 -0.0002682857 0.0000642658 -0.0000746399 0.0015895400 -0.0007758962 -0.0010108046 -0.0023929450 0.1839311708 -0.1610035615 -0.0301634437 -0.1495957685 0.2269612118 0.1911999890 0.2059685248 0.2420106229 0.4167286582 0.2842021970 0.1134635073 -0.1484937115 0.4270520450 -0.0066682770 0.0133700803 -0.2232839987 0.1384602907 -0.1896369226 -0.1426285756 0.1647887581 0.0913111699 -0.1364912906 -0.0310493177 -0.1697293120 0.1322469728 0.0052152681 -0.0194214077 0.0000561307 -0.0051068573 0.0072294869 0.0211042761 0.0121522638 -0.0152898809 -0.0060900367 0.0148591089 -0.0041868445 -0.0030564715 -0.0045389624 -0.0072218964 0.0042516690 0.0012489276 0.0076038672 -0.0024200909 0.0011462548 0.0012112949 -0.0035839176 -0.0036700628 -0.0063323786 0.0028197926 0.0006224122 0.0070565543 -0.0026393724 0.0005293131 0.0154227796 0.0031749862 0.0118885030 -0.0023428884 0.0080936735 0.0083450654 -0.0090968060 0.0013472819 -0.0006858659 0.0113309430 0.0020149121 0.0093481524 -0.0099305134 0.0146923099 0.0112442345 0.0020152014 0.0012050615 0.0005191430 -0.0018553478 -0.0007588130 0.0004063809 -0.0000630635 -0.0005152491 -0.0015624380 0.0012758123 0.0006000299 -0.0001290093 -0.0004978749 0.0000910059 0.0014980320 -0.0033616236 -0.0034834917 0.0024946382 -0.0012851813 -0.0013897345 0.0013353662 -0.0001586307 0.0001447783 0.0005157745 -0.0064355942 -0.0025229291 0.0017199308 -0.0019479610 -0.0006377550 -0.0000734810 0.0014927597 -0.0022904307 -0.0033038374 0.0055084763 0.0017898560 0.0049644258 0.0000794017 0.0000197509 0.0000333592 0.0001130626 -0.0000156507 -0.0001202807 -0.0005402253 0.0105060005 -0.0043187069 -0.0014068348 -0.0071384167 0.0031935503 -0.0106232710 0.0017547869 0.0009889395 0.0061710042 -0.0046711451 0.0007623465 0.0122114331 0.0004640918 -0.0015630260 0.0053632109 -0.0017627007 -0.0001674145 -0.0092274730 -0.0012785126 0.0022923081 0.0064038072 0.0039583816 -0.0026201515 0.0145544937 -0.0048922545 -0.0026790345 0.0024822499 -0.0029172455 0.0005685026 -0.0021127839 -0.0075682025 0.0033393270 0.0018378004 0.0057875777 -0.0026217054 0.0069715390 0.0027685569 0.0091734017 -0.0030314189 0.0010720820 -0.0055917172 -0.0112847780 -0.0066442843 -0.0154075479 -0.0039419146 0.0033400736 -0.0095197689 0.0059507575 0.0048344948 0.0050623849 -0.0052051324 -0.0067290010 -0.0026771593 -0.0061556593 0.0009676979 -0.0085312049 0.0006620765 0.0061464519 -0.0037871353 0.0029968081 0.0028791744 -0.0017392975 -0.0063096780 -0.0121945707 0.0103476360 -0.0029738530 -0.0123449444 0.0117239009 -0.0193036348 -0.0072125861 -0.0043842596 0.0007938024 -0.0021621572 0.0025187214 -0.0091973294 0.0327739331 0.0210507629 0.0114345239 -0.0328014999 -0.0253534015 0.0006430717 0.0346064920 -0.0468217743 0.0012988918 -0.0023345541 0.0009912617 0.0045025425 0.0024157883 -0.0011790346 -0.0038513313 0.0029200038 -0.0006679478 -0.0057743651 0.0039177794 -0.0015242826 0.0043907045 -0.0017497258 0.0004254815 0.0022876995 0.0027324056 0.0009734968 -0.0023789618 -0.0043264237 -0.0004460036 -0.0022650644 -0.0021166738 -0.0010760397 0.0011743150 0.0006799818 0.0010602170 -0.0006550970 -0.0018348550 0.0000449560 0.0007532875 -0.0005936415 0.0000075262 0.0003212365 0.0001814927 0.0001982003 -0.0014294758 0.0008628178 -0.0007598772 0.0008609472 -0.0006231989 0.0002717943 0.0016113320 -0.0009197026 0.0015821696 0.1707531595 -0.1226619295 -0.2091915917 -0.0152434163 -0.0325901545 -0.0027218156 0.0242906469 0.0032816879 -0.0134986905 0.0270382958 0.0198546485 -0.0119045829 -0.0015505052 -0.0066389371 -0.0008809045 -0.0318847111 0.0075108593 0.0221699080 -0.0015117128 -0.0129295830 -0.0040053202 -0.0033132787 0.0313051212 0.0124260849 -0.0008015260 -0.0147249690 -0.0059139790 0.0550896586 -0.0299365324 -0.0427632000 -0.0011875648 -0.0453873655 -0.0157258287 0.0046884920 0.0043592162 -0.0006202589 -0.0433428423 0.0104747572 0.0296738240 0.0346694791 -0.0527880005 -0.0259453198 0.0067435940 -0.0170744887 -0.0055382591 0.0068620836 0.0045249394 -0.0022274786 0.0006986005 0.0092032144 0.0009223053 0.0055795441 -0.0123032294 -0.0039755391 -0.0121909139 0.0162707847 0.0074052624 -0.0026224768 -0.0224004504 -0.0022008308 0.0022394448 0.0095040295 0.0020004538 0.0068632848 0.0671581416 0.0065966442 0.0331978157 -0.0117828541 -0.0160852484 0.0007598172 0.0542317772 0.0081557299 0.0237520160 0.0156156097 -0.0078434408 -0.0069298551 -0.0163030981 -0.0008388286 -0.0025192006 0.0082667820 -0.0045232926 -0.0002874655 -0.0005128524 -0.0005838697 0.0096654728 -0.0149638436 -0.0118145039 -0.0164642537 0.0051626908 0.0093054800 0.0089777460 0.0053376411 -0.0005198265 0.0012365883 -0.0005880218 0.0035341645 0.0052619168 0.0050034319 0.0006027115 -0.0205276011 0.0125526802 0.0042024629 0.0347107472 -0.0257809150 0.0226153170 0.0014812521 0.0013415094 -0.0007879012 -0.0021395800 0.0129529445 0.0060846978 -0.0389004934 -0.0641372844 0.0428282546 -0.0074482630 0.0460320697 -0.0199652554 -0.0294793611 -0.0568111500 -0.0613632610 -0.0153747120 0.0237086826 0.1369410304 0.0103820676 -0.1537060684 -0.1709980390 0.2752247005 -0.0399512971 -0.0363899886 0.1166908420 0.1192589604 0.2431756002 -0.0908823719 0.2844205261 -0.4411794826 -0.5038984329 -0.0584133072 -0.1169107349 0.0406269876 -0.0564944696 -0.0690123667 -0.0098870823 -0.0942052799 -0.0066698906 0.0146808065 -0.0484615071 -0.0091995323 -0.0007198786 -0.0002385363 -0.0014644199 -0.0012056689 0.0005013926 0.0000255437 0.0009221457 -0.0000002068 0.0005553764 0.0002482242 -0.0007193155 -0.0008720627 -0.0002494346 0.0003000305 0.0001442018 -0.0001328732 0.0006060478 0.0008491489 0.0020832376 -0.0008976281 0.0029719079 0.0026487832 -0.0023302808 0.0000556037 -0.0010271045 0.0000571697 -0.0005044652 0.0028884312 -0.0003539374 0.0020770099 0.0004426379 0.0008287975 0.0003329832 0.0007679439 0.0004919269 0.0005497423 -0.0011541516 -0.0007600427 -0.0010775261 0.0010989794 0.0005387983 0.0003674673 0.0011351780 0.0008443742 0.0006151399 -0.0014907249 -0.0009870410 -0.0008581360 -0.0020758267 0.0000036432 0.0012048880 0.0014355800 0.0032175354 0.0034505060 -0.0033614568 -0.0013857600 -0.0002759386 0.0001146728 -0.0002060820 0.0013653147 0.0015431180 0.0017895846 0.0035791797 -0.0000236205 0.0000030228 -0.0000618246 0.0005747171 0.0001884933 0.0006248605 0.0002153021 0.0009775728 0.0015803138 0.0021767303 0.0000622913 -0.0014205790 0.0012348965 -0.0082247599 0.0030897624 0.0005336165 0.0060643252 -0.0025486046 0.0034835830 0.0000801367 -0.0005534467 -0.0024537742 0.0023438369 -0.0004775931 0.0024734491 -0.0001375747 -0.0007137910 -0.0008133661 -0.0011562645 0.0004874355 0.0031699065 -0.0002847988 -0.0004376283 -0.0017121044 -0.0016421324 0.0009131323 0.0017197462 -0.0001629981 -0.0005006951 -0.0011678312 -0.0005989913 0.0003972936 -0.0008291070 -0.0042360166 0.0023392817 0.0016285891 0.0064449314 -0.0032829612 0.0003868779 0.0000674133 0.0006487980 -0.0002328086 0.0018058106 -0.0017280352 0.0039259035 0.0015737105 0.0050033235 0.0010696183 -0.0022509963 0.0030773516 0.0010663422 -0.0003716984 0.0019435707 -0.0009327906 -0.0018184784 0.0000118733 0.0030204398 0.0005503781 0.0043912019 -0.0000686236 -0.0003461109 -0.0000619845 0.0001529110 0.0103871646 0.0030479725 -0.0043407264 -0.0375894963 0.0386073069 -0.0108478560 -0.0063201443 -0.0226085131 0.0090934799 -0.0489306934 -0.0405477562 -0.0245104708 0.0130567372 0.0069104983 0.0701251012 -0.0431627864 -0.0757097803 0.0689698599 -0.0663906010 0.0070267709 0.0960813440 -0.0209176912 0.0241274782 0.0005294842 0.0078690031 -0.0012798663 -0.0146717971 -0.0033235783 0.0039704980 0.0039936901 -0.0050032174 0.0011948145 0.0051557915 -0.0045728698 0.0017475842 -0.0024368008 -0.0007790971 0.0002896172 -0.0034320875 -0.0033601076 -0.0021917034 0.0026300131 0.0067952249 -0.0009706329 0.0025991510 0.0015550443 0.0020341703 -0.0024217423 -0.0010906722 -0.0024835928 -0.0013484055 0.0001965990 -0.0012559931 0.0002824772 0.0002641111 0.0009824983 -0.0007791312 -0.0001233527 0.0006293924 0.0007304226 -0.0004726242 -0.0008442634 -0.0001333669 0.0003698230 0.0003725312 -0.0004690677 -0.0004709567 0.0006066362 -0.0440430419 0.0326210797 0.0608102280 -0.0029326448 0.0048874106 0.0032687606 -0.0038866049 0.0029020984 0.0034111234 -0.0094562486 -0.0024875956 0.0061735487 -0.0004326781 -0.0017527166 -0.0002811706 0.0084023428 -0.0020462944 -0.0058907114 0.0004624574 -0.0002705795 -0.0004562775 -0.0005377463 -0.0076171632 -0.0035849593 -0.0017461310 0.0044233815 0.0015422628 -0.0206940047 0.0104466764 0.0157949710 0.0002731579 0.0239544669 0.0093402487 -0.0012767912 -0.0013855403 -0.0003677414 0.0146879731 -0.0062380714 -0.0096928500 -0.0192451546 0.0207558933 0.0109935308 -0.0019788384 0.0065263198 0.0016154115 -0.0020601854 -0.0013826116 0.0007094203 -0.0002703229 -0.0036093590 -0.0003437316 -0.0023482010 0.0050354068 0.0019753898 0.0042638115 -0.0059330949 -0.0026347993 0.0006112965 0.0081644712 0.0009552476 -0.0014405829 -0.0035573891 -0.0012704063 -0.0050925327 -0.0270562421 -0.0069222305 -0.0105122570 0.0028941598 0.0048263264 -0.0007601366 -0.0200657894 -0.0031202394 -0.0092539797 -0.0058889838 0.0027164729 0.0035191536 0.0022263634 -0.0001349790 0.0010870320 0.0417865492 0.0032451135 0.0001964392 0.0008100384 0.0019865477 -0.0033982155 0.0097340227 0.0064810413 0.0141513950 -0.0016805567 -0.0071687151 -0.0073319452 -0.0038502551 -0.0001346759 -0.0008833625 -0.0053282766 0.0004215644 0.0064993523 0.0039701144 -0.0119045433 0.0035805991 -0.0201791635 -0.0105742694 -0.0235584897 -0.0310658963 0.0347553599 -0.0041901468 0.0001087506 0.0016705368 -0.0012920855 -0.0118053290 -0.0083503547 -0.1152067273 -0.0337267758 -0.0089477580 -0.0421838863 -0.0005170919 0.1392199621 0.0812064788 0.0014621550 0.0250955490 0.1858575378 0.1087578109 -0.0321445491 -0.0680520926 0.2718770335 0.1039242215 -0.1587907935 -0.0749612757 0.0845124750 0.4412204984 0.3423830564 -0.2394388473 -0.2253682347 0.4171605351 -0.1538553834 0.1025535218 -0.3177105183 -0.0743664571 0.0251989169 0.0429954080 0.0667107099 0.0171202414 0.0322217489 0.0332969264 -0.0188340878 0.0839674309 0.0086926998 -0.0028998701 -0.0056353950 -0.0059419603 -0.0082199241 0.0056546420 0.0019540354 0.0098661098 -0.0038459761 0.0002271716 -0.0008727072 -0.0038716828 -0.0048638730 -0.0089683147 0.0049573545 0.0013275086 0.0106118508 -0.0040179962 0.0005307842 0.0169231798 0.0043981541 0.0140049521 -0.0091213918 0.0146914278 0.0133432970 -0.0050798301 0.0002998768 -0.0012774428 0.0126227449 0.0026691552 0.0136596513 -0.0137645924 0.0203681530 0.0165173452 -0.0003474082 -0.0004771759 -0.0012173689 0.0013541358 0.0008432921 0.0009379407 -0.0013304886 -0.0002710315 0.0009837119 -0.0008705554 -0.0008385169 -0.0012604268 0.0017723815 0.0010017567 0.0004407870 -0.0004237152 -0.0005420773 -0.0014346657 -0.0024504910 -0.0022542701 -0.0045832865 0.0013193027 0.0007417912 0.0002705515 0.0006832052 -0.0000800370 -0.0020088600 -0.0021523067 -0.0024255153 -0.0053303150 0.0005147062 -0.0007208243 -0.0011624198 0.0037496435 0.0011879369 0.0033162847 -0.0001197779 -0.0005420598 -0.0008066874 -0.0006670927 -0.0000296707 0.0004424630 -0.0011485498 0.0068144673 -0.0026939869 -0.0019677722 -0.0030978798 0.0015905315 -0.0062454020 0.0002097119 0.0009100758 0.0030438492 -0.0011036076 -0.0000853069 0.0090663031 -0.0008636533 -0.0008035425 0.0054835090 -0.0048964874 0.0009942665 -0.0041695296 -0.0011347573 0.0012580474 0.0032006363 0.0015686935 -0.0011556585 0.0065667274 -0.0027966472 -0.0008564521 0.0013220856 -0.0019534457 0.0005358779 0.0001099669 0.0021896973 -0.0016741159 -0.0011840226 -0.0054199277 0.0029584019 0.0023723803 0.0010349568 0.0030585363 -0.0009506745 -0.0017525424 -0.0001302029 -0.0093426316 -0.0047504092 -0.0125825804 -0.0027668121 0.0039966762 -0.0076787749 0.0013269452 0.0024468918 0.0000265284 -0.0010465395 -0.0004714116 -0.0012148207 -0.0066993367 -0.0006530384 -0.0095442791 0.0000688621 0.0021947464 -0.0016899577 0.0009559217 -0.0046450086 -0.0033376437 0.0048924385 0.0135846086 -0.0165112272 0.0042310343 -0.0060200274 0.0304718858 -0.0244536767 0.0244677093 0.0224471483 0.0080566853 -0.0030419055 0.0003101208 -0.0368274704 -0.0052575460 0.0282064594 -0.0395095365 0.0092044516 -0.0365045431 0.0013921860 0.0116580475 -0.0182994641 -0.0127773842 -0.0251042719 -0.0150098596 0.0308472504 -0.0071431437 -0.0206807175 0.0121020113 0.0014640469 0.0010757569 0.0425128123 0.0034229627 -0.0032823914 -0.0402987285 0.0112841617 -0.0003254594 0.0032827425 0.0021335280 0.0020139684 -0.0070245008 -0.0113365953 0.0027597266 -0.0032122462 -0.0011027115 -0.0033283493 0.0042309195 0.0035117376 0.0027936841 0.0095335082 0.0042042379 0.0094671652 0.0002509130 -0.0005495493 -0.0004395060 0.0091109437 0.0052986715 -0.0021033984 -0.0011972662 -0.0004945660 -0.0002881505 0.0004982365 0.0000802693 0.0002662824 0.0019604570 0.0066461789 0.0002981180 0.0278771150 -0.0152714266 -0.0347566000 0.1005307013 0.0589183926 -0.0357548282 -0.0369333103 -0.0508110025 0.0039677890 0.0210960957 -0.0371873877 -0.0314570146 0.0146508711 0.0420782911 0.0028385430 0.0015329565 -0.0006676092 -0.0008696518 0.0021584352 0.0548702230 0.0194671438 0.0138122402 -0.0089387781 0.0075388939 0.0289146841 0.0005923510 -0.0001519611 0.0898632062 -0.0374952998 -0.0672451541 0.0062728259 -0.1548842632 -0.0676204218 0.0039764160 0.0069277912 -0.0008471623 -0.0321703482 0.0215732774 0.0260938013 0.0647041190 -0.0520398341 -0.0558572748 0.0013841075 -0.0144627943 -0.0026238089 -0.0051246699 0.0014897652 0.0024582808 0.0100043857 0.0074056594 -0.0033643837 0.0061352280 -0.0164630801 -0.0052131810 -0.0070492127 0.0188923347 0.0055414990 -0.0019658887 -0.0243192344 -0.0026975690 -0.0193825826 0.0285618501 0.0129229761 0.0090107008 0.0386085316 0.0037264905 0.0283545969 -0.0011283081 -0.0109242427 0.0030218772 0.0876153234 0.0119595706 0.0466443389 0.0348412578 -0.0149706720 -0.0199852844 0.0302060925 0.0044081047 0.0007232450 -0.5662827393 -0.0651254004 0.0004134716 -0.0013595385 -0.0049665743 0.0004246845 -0.0078915138 -0.0028438626 0.0100422924 0.0096147750 0.0012679217 -0.0036891220 -0.0031277172 -0.0002277225 -0.0013161886 -0.0018436415 -0.0003873069 0.0033977106 0.0007721325 -0.0057939395 -0.0006951470 -0.0058376353 -0.0072236267 -0.0057240406 -0.0018179270 0.0035222448 -0.0033674510 0.0005665792 0.0023685517 0.0026657760 -0.0036330092 -0.0031460650 -0.0595832410 -0.0073008154 -0.0115777260 -0.0218089858 -0.0008332088 0.0725009398 0.0422713437 0.0072887328 0.0187546629 0.0778406828 0.0518171829 0.0175792246 -0.0269161447 0.0961968662 0.0281737061 -0.0314674129 -0.0507161719 0.0407043926 0.0547402374 0.0398933074 -0.0558581715 -0.0252660261 0.0391041117 0.0118512774 0.0539895720 -0.0453094067 -0.0035079204 -0.0190960674 0.0097985500 0.0083376970 0.0071646643 0.0203898670 0.0062369905 -0.0141200066 0.0035916372 0.0122426894 0.0434379551 0.0774521769 0.1081578460 0.1029345485 -0.0767524071 -0.0335991738 -0.1300389356 0.0438287703 -0.0102560150 0.0249520899 0.0577863952 0.0803381784 0.1210767224 -0.0651939979 -0.0175464421 -0.1297829115 0.0332200445 -0.0278621650 -0.2469038147 -0.0556497090 -0.2063389438 0.1140111205 -0.1878475047 -0.1839307228 0.0128704198 -0.0030669690 0.0052025242 -0.2127602648 -0.0600391095 -0.1702450801 0.1136065445 -0.2285058094 -0.1883308643 0.0018865342 0.0017808543 0.0032448732 -0.0040970901 -0.0025900913 -0.0022795056 0.0025874959 0.0002866811 -0.0027909622 0.0041378580 0.0030575904 0.0035855759 -0.0061236241 -0.0037559926 -0.0022296073 -0.0050473861 -0.0008318763 0.0053183527 0.0054532157 0.0081988583 0.0127880626 0.0010297551 -0.0001656587 -0.0006223226 -0.0040019822 0.0009743078 0.0059999834 0.0060410415 0.0076798800 0.0158788458 0.0037141459 -0.0035294142 -0.0052162361 -0.0188882360 -0.0049388889 -0.0148741847 -0.0000692308 0.0002698582 0.0001825671 -0.0014016773 -0.0000810518 0.0008586580 -0.0132035183 0.0370828665 -0.0111058050 0.0046320619 -0.0510903859 0.0198883921 0.0028517800 0.0058225613 -0.0030664047 0.0144233764 -0.0243745096 0.0067659304 -0.0779690689 0.0160050915 0.0082332239 -0.0350267982 0.0705529897 -0.0205762392 -0.0196227375 0.0159414288 -0.0028700155 -0.0023534031 0.0007361327 0.0001255311 -0.0085491201 0.0171367361 -0.0041374216 0.0322856423 0.0524441971 -0.0250643403 0.0023817824 0.0048203277 -0.0011647790 0.0022624717 0.0008915941 0.0024987892 -0.0080540594 -0.0015786654 -0.0116036656 0.0044440669 -0.0016445424 0.0082057731 0.0143573594 0.0086536544 0.0165306178 0.0039379388 0.0021842977 0.0051806931 -0.0087159844 -0.0065154057 -0.0078807791 0.0051787073 0.0057779289 0.0033596827 0.0174473238 0.0032245480 0.0222143858 0.0036180496 0.0016034396 0.0044883889 0.0037576197 0.0069263957 -0.0006339928 -0.0132777259 -0.0261876456 0.0252837050 -0.0075988685 -0.0163616798 -0.0023628442 -0.0124648992 -0.0256259449 -0.0202333342 -0.0076884498 0.0075594708 0.0036488888 0.0122753050 -0.0466475127 -0.0294389333 0.0127062432 -0.0274318785 -0.0198216394 0.0570172004 -0.0121876013 0.0149507609 0.0104033341 -0.0037185822 -0.0022764373 0.0175928647 -0.0061202076 -0.0030371679 -0.0049361362 -0.0018978223 0.0015107629 0.0063207099 0.0225721019 -0.0164289589 -0.0025060531 -0.0033070089 0.0027913302 -0.0441206360 -0.0139402562 -0.0443477185 0.0415638351 0.0000380003 0.0570831527 0.0134719612 0.0103011323 0.0122966466 0.0100392988 0.0018618754 -0.0177504580 0.0196874554 0.0049955365 0.0063930277 0.0062862667 -0.0043020575 0.0136193364 -0.0002621648 0.0013203421 -0.0006174860 0.0052310891 -0.0009762627 -0.0010895595 -0.0056774742 -0.0006060532 0.0028259461 -0.0025705079 0.0000905700 -0.0011649750 -0.0608969893 0.0418333819 0.0881461228 -0.0205778706 -0.0033975440 0.0083663659 0.0014122993 0.0112634411 0.0034681588 -0.0126398677 0.0032868491 0.0107766074 -0.0033532256 -0.0068718880 0.0001226962 0.0106794656 -0.0036608324 -0.0078269590 -0.0011112139 -0.0078410988 -0.0022651281 -0.0015403560 -0.0094689820 -0.0062209535 -0.0065099715 0.0026291831 0.0022334297 -0.0429985586 0.0189634863 0.0319286391 -0.0022076460 0.0466782282 0.0202763125 -0.0029122832 -0.0035260463 0.0003228887 0.0209688395 -0.0068361029 -0.0162275435 -0.0187629705 0.0245583732 0.0224722284 -0.0011642925 0.0096215715 0.0021472338 -0.0012847871 -0.0014731536 0.0003605095 -0.0021245099 -0.0055169472 0.0001750538 -0.0034888041 0.0070838749 0.0023145155 0.0061362026 -0.0097882901 -0.0038667763 0.0008824665 0.0130368370 0.0015318761 0.0003934785 -0.0081046419 -0.0011382044 -0.0037558833 -0.0347032106 -0.0005252652 -0.0210205194 0.0064307276 0.0087951002 -0.0013987797 -0.0359719448 -0.0049488621 -0.0195744374 -0.0132243457 0.0064335109 0.0070486418 -0.0009383752 -0.0003770699 -0.0022784727 0.1184830410 0.0067060211 -0.0402312634 0.0063259725 0.0967065973 -0.0009242733 0.0010940146 0.0016738424 -0.0062757049 -0.0025828813 0.0010607466 0.0023762629 0.0024467199 0.0001365650 0.0053633928 -0.0011278666 0.0006493227 -0.0049662819 0.0004787004 0.0106207357 0.0254031324 -0.0133807000 -0.0030345983 0.0282013540 -0.0040741299 0.0014840320 0.0021865331 -0.0004037372 -0.0023590898 -0.0014033939 0.0049850131 0.0009802515 0.0910592153 0.0002452069 0.0288962963 0.0364535506 0.0074508084 -0.1250946043 -0.0738252642 -0.0264371484 -0.0446148461 -0.0244997173 -0.0628164764 -0.2122444560 0.0034130752 0.1479701442 0.2420796727 -0.3656462565 0.0912604579 0.0219693199 -0.0809822430 -0.0419325157 0.2394669730 0.0241138387 0.0267683787 -0.2226342233 -0.3483803853 0.0737325104 -0.0473647326 0.0208609473 -0.0230662910 -0.0278262779 0.0060019645 -0.0291483749 0.0217330782 -0.0103096154 -0.0083006542 0.0099422127 0.0027765616 0.0106086903 0.0130487564 0.0104211636 -0.0096386009 -0.0059809446 -0.0163610025 0.0073067295 0.0005175684 0.0061795921 0.0058948436 0.0097247415 0.0160343147 -0.0101704815 -0.0040927533 -0.0199399819 0.0082212695 -0.0014243189 -0.0279399558 -0.0095684608 -0.0229744250 0.0239875651 -0.0317296272 -0.0268158040 -0.0016873502 0.0015242192 0.0027181855 -0.0167971422 -0.0102647453 -0.0198672927 0.0221688012 -0.0387528327 -0.0271560464 -0.0786205476 -0.0564322432 -0.0598637659 0.1021334591 0.0556785814 0.0244707087 -0.0328559024 0.0078082989 0.0734772245 -0.0905839089 -0.0582747950 -0.0456381284 0.1002290183 0.0523026920 0.0044502594 0.1911350586 0.0650139405 -0.1376373439 -0.0529795444 -0.0922610530 -0.2222877033 0.0002381069 0.0085944947 0.0024014456 0.2013745374 0.0559348789 -0.1259595135 -0.0498795309 -0.0841463325 -0.2277485678 0.0014277486 -0.0022862711 -0.0029536390 -0.0013120029 -0.0002918012 -0.0011705031 -0.0021612301 -0.0090438722 -0.0126900928 0.0085956172 -0.0002085809 -0.0034196762 -0.0002075543 0.0069681570 -0.0025918944 0.0029976088 -0.0210682581 0.0092142680 -0.0258768377 0.0123647321 -0.0008231607 0.0202414742 -0.0158551111 0.0027015447 0.0437605950 0.0093507211 -0.0089395679 0.0038257930 0.0209616744 -0.0086140561 -0.0363745632 0.0029378945 0.0055116028 0.0158905450 0.0036671355 -0.0041576809 0.0680400207 -0.0081352210 -0.0118474980 0.0316000226 0.0224065093 -0.0141977069 0.0201789926 0.0737877161 -0.0310522381 -0.0274063949 -0.0549855712 0.0095436546 -0.0320846954 -0.0296355331 -0.0288397589 0.0040347091 0.0004801979 0.0060153788 0.0148459800 -0.0087435212 0.0354395299 0.0227750504 -0.0660129182 0.0886000518 -0.0124846232 -0.0159683877 -0.0058982162 0.0265125140 0.0407767312 0.0084536330 -0.0396026828 -0.0327736925 -0.0380246766 -0.0366246042 -0.0908543006 0.0154690890 -0.0015436135 -0.0029381441 0.0015307951 -0.0022774395 0.0151405125 -0.0123174650 0.0019278515 0.0088238908 -0.0154332480 0.0188426109 0.0113002067 0.0072841576 0.0082936785 -0.0065220949 -0.0036329625 -0.0210348578 0.0407986389 0.0331437828 -0.0178463193 0.0294918853 0.0135477056 -0.0567372176 0.0122822148 -0.0131080773 0.0156548123 -0.0102369530 0.0043108196 0.0329796533 0.0001863942 -0.0029409734 -0.0162475522 0.0049762942 -0.0002374441 -0.0141922993 0.0315955141 -0.0173725801 0.0195407300 -0.0041841931 0.0011219344 -0.0176783333 -0.0023541129 -0.0186034558 0.0160509676 -0.0180695029 0.0337950302 0.0002690593 0.0001432274 0.0023617886 0.0122780669 0.0070215984 -0.0062222518 0.0167421711 0.0017443717 0.0109886372 0.0042301923 -0.0028803543 0.0056195523 -0.0029343819 -0.0002197954 0.0012281511 -0.0033321869 -0.0016553546 0.0023384235 0.0045061357 0.0010366325 -0.0023517245 0.0002936561 0.0009615037 -0.0022390292 0.0776614283 -0.0560010625 -0.1105291956 -0.0048532810 -0.0140003200 -0.0031928424 0.0107668183 -0.0001679970 -0.0064653247 0.0125857075 0.0080823564 -0.0059960912 -0.0006078292 -0.0002402152 0.0004312856 -0.0150590560 0.0030700401 0.0103568331 -0.0005563929 -0.0036853788 -0.0011436006 -0.0006097119 0.0138825579 0.0053916904 0.0006752863 -0.0117889829 -0.0037177312 0.0270335252 -0.0151547523 -0.0209314028 -0.0004066796 -0.0267571031 -0.0102913162 0.0029792008 0.0015342381 -0.0008494632 -0.0211723217 0.0052357038 0.0159323537 0.0138194907 -0.0228698580 -0.0185979662 0.0010050434 -0.0099020889 -0.0020983617 0.0022372394 0.0013195280 -0.0007947287 0.0012044787 0.0056254753 0.0002562835 0.0033159744 -0.0058493344 -0.0020143236 -0.0064707545 0.0091158303 0.0038736561 -0.0006829447 -0.0119520987 -0.0014648026 0.0028981251 0.0053949284 -0.0006877509 0.0033086258 0.0359058826 0.0002237037 0.0216989320 -0.0078787116 -0.0089051597 0.0013595790 0.0303105304 0.0041914812 0.0174170416 0.0110164663 -0.0058398929 -0.0035984510 -0.0071778602 -0.0006313192 -0.0018675848 -0.0068859985 0.0080862338 -0.0231147419 0.0012363690 0.0497474481 0.0041165207 -0.0025645028 -0.0032354362 0.0059678327 0.0043249537 -0.0000487818 -0.0025681847 -0.0030378198 -0.0001091123 -0.0061309650 0.0017107332 -0.0014699926 0.0084035923 -0.0011781275 -0.0164242350 -0.0320584664 0.0158139461 0.0040601812 -0.0306654613 0.0059025809 -0.0028958145 -0.0023359692 0.0008089335 0.0028764994 0.0016790872 -0.0040607018 0.0000369346 -0.1543738343 -0.0054705825 -0.0427612010 -0.0617391237 -0.0020261499 0.1987374032 0.1163756502 0.0345619318 0.0646957838 0.0373049800 0.0822055901 0.2630727403 -0.0069397131 -0.1771156441 -0.3009640040 0.4546276182 -0.1147394976 -0.0266268162 0.0712363988 0.0312272135 -0.2602702342 -0.0167878507 -0.0492131130 0.2569811115 0.3878610659 -0.0686443167 0.0570758791 -0.0252610732 0.0200674831 0.0226522734 -0.0098508362 0.0258159076 -0.0305662186 0.0156757298 -0.0016914308 -0.0138609267 -0.0069717210 -0.0013798752 -0.0084431782 -0.0112340426 0.0045116489 -0.0001014411 0.0084181887 -0.0002707131 0.0041834829 0.0010240641 -0.0042728617 -0.0048474828 -0.0074061378 0.0015789238 -0.0015402083 0.0036705404 0.0018740281 0.0044677434 0.0375416583 0.0011623001 0.0222261544 0.0069167105 0.0030967692 0.0067070830 0.0027402230 -0.0018235886 -0.0025838939 0.0228905546 0.0005870605 0.0110056708 0.0056163791 0.0031673753 0.0031259126 -0.0426759709 -0.0300499658 -0.0302799939 0.0528593519 0.0281580559 0.0099008930 -0.0141540200 0.0058001321 0.0399741494 -0.0469345923 -0.0295298376 -0.0217601544 0.0497917615 0.0253227356 -0.0004113592 0.1055162909 0.0356597916 -0.0722342393 -0.0218871980 -0.0410019038 -0.1093840200 -0.0054136779 0.0019359629 -0.0000380734 0.1115250107 0.0324540917 -0.0645348887 -0.0203843241 -0.0392196584 -0.1103103860 -0.0017039901 0.0027222883 0.0034509349 -0.0008139552 -0.0002406643 -0.0003951920 -0.0007999108 -0.0029820112 -0.0038296891 0.0078399648 -0.0000835009 -0.0037876925 0.0037245237 -0.0155481616 0.0054171662 0.0045469246 0.0000073365 0.0000220024 -0.0145052019 0.0108169888 -0.0018949027 0.0113292593 -0.0074803297 0.0010295165 0.0468744552 0.0072553704 -0.0098676810 0.0025266899 0.0132218721 -0.0056247505 -0.0235378717 0.0009413685 0.0041449305 0.0099815092 -0.0005596420 -0.0015586485 0.0678429815 -0.0093919950 -0.0124555912 0.0230566016 0.0153762001 -0.0101526461 0.0121206286 0.0353205435 -0.0107216885 -0.0120689970 -0.0158144761 -0.0030295032 -0.0220534512 -0.0195294960 -0.0203501978 0.0029421657 0.0051826591 0.0006222025 0.0272915550 0.0026137875 0.0455070958 0.0184866127 -0.0491798122 0.0686104316 -0.0076774310 -0.0135117494 -0.0006589871 0.0163052347 0.0230900405 0.0066564741 -0.0119568970 -0.0186027121 -0.0047754239 -0.0236417902 -0.0603998813 0.0117609424 0.0013499412 0.0045833673 -0.0017881980 0.0054014454 -0.0236955164 0.0195932485 -0.0036535190 -0.0118947275 0.0209417911 -0.0244842596 -0.0192184937 -0.0131125104 -0.0178017026 0.0120125487 0.0066625654 0.0366702271 -0.0655585824 -0.0577661882 0.0367633206 -0.0623622796 -0.0289403353 0.1147142534 -0.0195845909 0.0173397775 0.0105954545 -0.0107824059 -0.0080528477 0.0202492738 -0.0052030216 -0.0088242358 -0.0082798798 0.0014217926 0.0014931641 0.0145415429 0.0278315022 -0.0145954536 -0.0042944079 -0.0018170286 0.0018284397 0.0118308377 0.0089974326 0.0084530030 -0.0133195356 -0.0309789583 0.0071252460 -0.0093633530 -0.0049366935 -0.0082686365 0.0099695127 0.0058220805 0.0127894134 0.0045741992 0.0016072909 0.0053832024 -0.0018921598 0.0004010350 -0.0029756368 -0.0008254299 -0.0007985569 -0.0017146693 0.0004906987 0.0017296420 0.0011565939 -0.0000394667 -0.0010572805 -0.0008675553 -0.0014655450 -0.0084904532 -0.0001555708 0.0297701096 -0.0296948745 -0.0321936018 -0.1527379078 -0.0994818916 0.0514661091 0.0605828910 0.0727295138 -0.0104428619 -0.0192240482 0.0625535763 0.0405013625 -0.0235169548 -0.0577719083 -0.0017461266 -0.0108090819 0.0004773134 0.0063492038 -0.0062501524 -0.0795579132 -0.0262170941 -0.0144106589 0.0210561247 -0.0096155237 -0.0431119084 -0.0065145027 0.0001316993 -0.1139964545 0.0425476309 0.0834042983 -0.0122199371 0.1922376100 0.0878169999 -0.0043044555 -0.0096452419 0.0001201284 0.0276116433 -0.0253124225 -0.0234623716 -0.0704907866 0.0483344364 0.0574117664 0.0010328282 0.0136583748 0.0014205512 0.0081736157 -0.0010676606 -0.0036747452 -0.0113809299 -0.0076046787 0.0039436254 -0.0069161886 0.0184044105 0.0058802207 0.0050203659 -0.0190767928 -0.0049221534 0.0013256012 0.0251242060 0.0031021272 0.0214012223 -0.0314093300 -0.0146953990 -0.0104142925 -0.0412596703 -0.0044335687 -0.0240954493 -0.0034179225 0.0110375136 -0.0040487543 -0.0931388664 -0.0123928890 -0.0502776173 -0.0386164181 0.0157028452 0.0240693925 -0.0472829692 -0.0053520370 -0.0061014756 0.7800771906 0.0683037854 0.0055521726 -0.0036522030 -0.0224086765 -0.0010758855 0.0108523376 0.0041462999 -0.0067043247 -0.0120950570 -0.0043321051 0.0022621152 0.0025571420 0.0005145599 -0.0002237922 0.0009929304 -0.0002967151 -0.0016211452 -0.0013784398 0.0008813719 -0.0084988478 0.0016451285 0.0016737123 -0.0047680578 -0.0004897434 0.0007176840 0.0020920124 -0.0002216445 -0.0013576311 -0.0026334025 -0.0003468820 0.0012344791 0.0202195401 0.0137149682 -0.0060293431 0.0057525577 -0.0071581472 -0.0131127526 -0.0055959995 0.0101488285 0.0072958997 0.0188800764 0.0246124835 0.0589716821 -0.0061090434 -0.0318102918 -0.0683100250 0.1055757380 -0.0244393289 -0.0084969314 0.0197603484 0.0120965649 -0.0390054798 -0.0074240095 0.0027875437 0.0271704973 0.0515142897 -0.0143012466 0.0067233492 0.0171414660 0.0060627329 0.0138271112 -0.0053964321 -0.0029983235 -0.0054413871 0.0131794021 0.0159934532 -0.0132524306 0.0180045928 0.0320951500 0.0448030034 0.0453244350 -0.0347222386 -0.0169462653 -0.0611155691 0.0255264675 0.0006911407 0.0191181632 0.0186267870 0.0300557330 0.0605835602 -0.0325323817 -0.0085513238 -0.0700417739 0.0271222514 -0.0050549014 -0.1418342840 -0.0351534821 -0.0949075912 0.0794613742 -0.1135180900 -0.0949456458 -0.0158721579 0.0055151826 0.0055047284 -0.0752058858 -0.0312976465 -0.0721500066 0.0707579471 -0.1228933969 -0.0952471558 0.0116817416 0.0097420282 0.0142996398 -0.0199410200 -0.0117963724 -0.0080001654 0.0096056287 -0.0003872118 -0.0153992479 0.0167779011 0.0122181172 0.0128706602 -0.0228891749 -0.0127925736 -0.0043264872 -0.0250864571 -0.0061825246 0.0258431310 0.0205464884 0.0231459084 0.0532899408 0.0005422114 -0.0009361580 0.0010970689 -0.0309636255 -0.0072029287 0.0275419355 0.0197611477 0.0250304554 0.0596202374 0.0063588942 -0.0092741613 -0.0128627481 0.0020000612 0.0010009833 0.0020282426 0.0004257459 0.0007662102 0.0011236640 -0.0026059215 0.0001247989 0.0008986355 -0.0095989143 -0.0001911127 0.0020692307 0.0067644232 -0.0200538915 0.0071667939 -0.0082050699 0.0142991566 -0.0043679424 0.0187333701 -0.0177350769 0.0036408042 0.0047547800 0.0165537529 -0.0061513709 -0.0170378921 0.0550687985 -0.0180326675 -0.0307134669 0.0105045990 0.0018324694 0.0035490985 -0.0059776570 0.0015454561 0.0780944225 -0.0009559547 -0.0190741919 0.0476989437 0.0559314238 -0.0292974094 0.0024740504 -0.0046051741 0.0075678981 0.0056893176 0.0192314170 -0.0086560417 -0.0152789152 -0.0052736112 -0.0202771468 0.0067177348 0.0060555967 0.0057891090 0.0454475707 0.0230331363 0.0578784150 0.0134547406 -0.0134255852 0.0330965054 -0.0126905869 -0.0135094689 -0.0082220313 0.0077616759 0.0047101364 0.0080896863 0.0406720024 0.0069906145 0.0545919187 0.0057856915 -0.0018217387 0.0106627895 -0.0026881286 -0.0065866737 -0.0012849527 0.0195066458 0.0221817748 -0.0238768863 0.0081671281 0.0097926224 0.0238609741 -0.0080412546 0.0268386439 0.0233690544 0.0059942105 -0.0077640943 -0.0017210112 -0.0068136510 0.0555393830 0.0294955815 -0.0044328071 0.0088976908 0.0092230030 -0.0453876349 0.0236336879 -0.0319550918 -0.0783535559 0.0216061307 -0.0071612102 -0.0717270800 0.0068185227 0.0018036254 0.0580228006 -0.0083966752 -0.0023572741 0.0174766861 -0.1481316433 0.0761479025 -0.0690218749 0.0250821175 -0.0062285040 -0.0315297664 -0.0331307168 -0.0198725323 0.0325928118 0.1370121687 -0.0592068469 0.0357666727 0.0180229996 0.0309287799 -0.0503776864 -0.0262208223 -0.0496188487 -0.0187034968 -0.0040239067 -0.0155528827 0.0097013604 -0.0029870260 0.0114735005 0.0218314683 0.0074499095 -0.0035544481 0.0005760984 0.0011870795 0.0019930898 -0.0014754136 -0.0015867273 0.0002137127 -0.0014561428 -0.0019684835 -0.0035231388 0.0294737239 -0.0251320005 -0.0385596625 -0.0542516638 -0.0388833342 0.0169024598 0.0236334053 0.0244235316 -0.0054491447 -0.0022695526 0.0237569672 0.0116406352 -0.0084154018 -0.0183515488 0.0000941578 -0.0075212993 0.0002706939 0.0045482450 -0.0028171521 -0.0271922175 -0.0085981814 -0.0045371875 0.0099771761 -0.0021214268 -0.0142695752 -0.0073624030 -0.0008725879 -0.0322375541 0.0098430305 0.0236677482 -0.0048414559 0.0544614747 0.0258978067 -0.0009275690 -0.0034527212 -0.0001685253 0.0029266203 -0.0056996919 -0.0033418494 -0.0143394913 0.0068252282 0.0115072887 0.0013547125 0.0017930195 -0.0003156958 0.0037012991 0.0004147128 -0.0015276031 -0.0034441344 -0.0011970100 0.0013317603 -0.0016626477 0.0044443181 0.0014630611 0.0001847250 -0.0041110236 -0.0007468227 -0.0001488185 0.0048736728 0.0007674246 0.0064647866 -0.0082232497 -0.0040815747 -0.0024598853 -0.0025567230 -0.0002804570 -0.0023685382 -0.0032755907 0.0014399084 -0.0013948823 -0.0226273928 -0.0027281136 -0.0136554055 -0.0106833429 0.0042747504 0.0073329056 -0.0174794826 -0.0019402571 -0.0049316031 0.2544122666 0.0257460646 -0.0028290432 0.0128539943 0.0467244215 0.0021826121 0.0009894212 -0.0007709303 -0.0009308389 -0.0006711109 -0.0000701624 0.0000757878 -0.0002885616 0.0000781207 -0.0010130802 0.0011944531 -0.0006646167 0.0039423831 -0.0001767179 -0.0046647828 -0.0095023961 0.0071958094 0.0025103505 -0.0054062786 0.0021043164 -0.0014030374 0.0001707020 0.0002477312 0.0003379053 0.0000247926 0.0000818047 0.0009826817 -0.0622962433 -0.0118366558 -0.0080772765 -0.0237641144 0.0130773675 0.0619197412 0.0327682426 -0.0008076558 0.0094625904 -0.0143443470 0.0081607096 0.0768696356 0.0073255590 -0.0863533294 -0.0943842459 0.1460144660 -0.0219036002 -0.0179443805 -0.0014297072 -0.0063785439 -0.0448880782 0.0048601673 -0.0252743903 0.0558638470 0.0742366918 -0.0019366178 0.0147324994 -0.0047498579 0.0016089677 0.0014605424 -0.0048612812 0.0018167426 -0.0111924482 0.0078462481 -0.0052019569 -0.0065624606 0.0288108904 0.0032384879 0.0275717067 0.0468337334 -0.0174802307 0.0029460045 -0.0332581536 0.0017355567 -0.0142602281 -0.0058241088 0.0141198499 0.0145428138 0.0324862128 -0.0045201335 0.0099641185 -0.0162317364 -0.0066735033 -0.0149208288 -0.1618912998 -0.0102297219 -0.0834345775 -0.0210465038 -0.0179442469 -0.0281104740 -0.0156840453 0.0049263277 0.0037014335 -0.0973590668 0.0008645760 -0.0444695162 -0.0221838167 -0.0025286927 -0.0162985012 -0.0091837825 -0.0125428642 -0.0308073808 0.0328082321 0.0216850192 0.0211098633 -0.0247101305 -0.0024419832 0.0283054258 -0.0270137689 -0.0233022350 -0.0332620399 0.0496107208 0.0302929697 0.0189037613 0.0126711848 -0.0055749041 -0.0409616050 -0.0588914670 -0.0605338764 -0.1148780928 -0.0095824782 -0.0010338721 -0.0013713386 0.0242562244 -0.0053337190 -0.0526078613 -0.0608939034 -0.0669755112 -0.1430140769 0.0061854268 -0.0088380844 -0.0121412006 0.0072708425 0.0022714471 0.0059022452 0.0001711712 0.0008561360 0.0022928717 0.0122999130 0.0000429755 -0.0062582805 0.0082788008 0.0621097066 -0.0246438639 -0.0204449257 0.0115726860 -0.0029757157 0.0705796091 -0.0589381085 0.0116450238 -0.0689157949 0.0412918515 -0.0045601243 -0.2176175515 -0.0445954099 0.0497001749 -0.0063485879 -0.1015863219 0.0400999922 0.1305756146 -0.0161584381 -0.0193534655 -0.0403391877 0.0199945984 -0.0001170342 -0.4054118170 0.0459261218 0.0829599316 -0.1651046224 -0.1444070637 0.0841493656 -0.0205958188 -0.0072589247 -0.0264846553 -0.0088621968 -0.0671385488 0.0453817515 0.0785851685 0.0408979590 0.0943325464 -0.0261432045 -0.0346366529 -0.0139910505 -0.2113903807 -0.0944484259 -0.2841109491 -0.0730137347 0.1135123193 -0.2095562821 0.0524969168 0.0646728269 0.0270138922 -0.0444335119 -0.0367583890 -0.0386238412 -0.1439169611 -0.0077845580 -0.2063655717 0.0029373948 0.0720221784 -0.0537167812 -0.0010174408 -0.0003190413 -0.0007821785 0.0108634083 -0.0017441760 -0.0002051889 0.0014888366 0.0009039866 0.0137486191 -0.0078645694 0.0005115236 0.0013513310 -0.0051665522 0.0033208876 0.0020259618 0.0071522316 -0.0184115116 -0.0141872534 0.0073265857 -0.0196444068 -0.0132610406 0.0365700073 -0.0048456885 0.0028487972 -0.0010495881 -0.0100979376 0.0033267437 0.0222400441 0.0027024950 -0.0037241270 -0.0052024341 0.0047745070 -0.0010519926 -0.0118656519 0.0002367413 0.0010908191 0.0089910794 0.0045389857 -0.0020082482 0.0005958080 0.0001708043 0.0016118173 -0.0001494244 -0.0011284507 -0.0013365323 -0.0010173121 -0.0011504487 -0.0002214341 0.0016900591 0.0026988544 -0.0020149806 0.0047735550 0.0006432368 0.0049811132 0.0008988620 -0.0004794987 -0.0004640190 -0.0004959669 -0.0000063085 0.0000328974 -0.0042615422 -0.0025440961 0.0048092991 0.0050481157 0.0024082943 -0.0055749399 0.0003133553 0.0021290148 -0.0037284526 0.0301147912 -0.0155691748 -0.0434309433 0.0106774136 0.0043559594 -0.0047471033 -0.0025374434 -0.0061451231 -0.0006049958 0.0043148898 -0.0042736996 -0.0053038480 0.0015169096 0.0055224442 0.0007381278 -0.0019760283 0.0008165590 0.0014746258 0.0005197777 0.0056018032 0.0022248086 0.0010115711 0.0004290796 0.0017058346 0.0032969125 -0.0034989424 -0.0013790955 0.0130816647 -0.0054189025 -0.0103248120 0.0019190992 -0.0188925059 -0.0060879682 0.0033414738 0.0045398530 -0.0011877702 -0.0078649433 -0.0036547016 0.0079665266 -0.0140958296 0.0001157153 -0.0006954861 -0.0009514278 -0.0024276488 -0.0004717847 0.0007680675 0.0006407441 -0.0002456417 -0.0003942736 0.0029141766 0.0005790023 0.0018444152 -0.0019751129 -0.0008789489 -0.0032317397 0.0037625880 0.0019143694 0.0004966986 -0.0052441375 -0.0009265983 0.0064376446 -0.0011886110 -0.0038186701 0.0012577058 0.0103978175 -0.0015302229 0.0101844581 -0.0045754308 -0.0046170757 0.0013499342 0.0115253365 0.0008975632 0.0081219646 0.0053369026 -0.0029388482 -0.0027523486 0.0027956194 0.0004026559 0.0018293560 -0.0669026572 -0.0040665897 -0.0028263499 -0.0005765622 0.0045460317 -0.0137484073 0.0053026379 0.0107552147 -0.0054060652 -0.0216046734 -0.0105573599 0.0064383998 0.0079592724 0.0008669791 -0.0042612854 -0.0023167143 0.0026310701 -0.0358564314 -0.0238688864 0.0236733684 -0.0088691234 0.0055098664 -0.0004548946 -0.0070094163 -0.0070848206 0.0073485442 0.0000156119 -0.0003383737 -0.0004304495 -0.0033699352 -0.0085754816 -0.0050479246 0.5100635529 0.3088398348 -0.1102683016 0.1675833666 -0.2008148764 -0.3485653278 -0.1604174696 0.2238813515 0.1396500904 0.0034282798 0.0194213357 0.0776222257 0.0024588707 -0.0590489161 -0.0741156068 0.1253640401 -0.0359638687 -0.0042597383 0.1129533792 0.0842750019 -0.0835119802 -0.0581483131 0.1010952338 -0.0069844686 0.0606951974 -0.0831518114 -0.0133749066 0.0323870166 0.0334669726 0.0563308104 0.0098844207 0.0232939509 0.0246846893 -0.0062914218 0.0725242728 -0.0016363785 0.0006596778 0.0036239640 0.0017453785 0.0010073613 -0.0017660445 -0.0009781029 -0.0023964118 0.0008026908 0.0000453375 0.0016736603 0.0014642790 0.0023611298 0.0011379399 -0.0015923032 -0.0011262305 -0.0027452068 0.0006106715 -0.0002656319 0.0007530288 -0.0006441880 -0.0028356424 0.0037371731 -0.0042395643 -0.0043336712 -0.0012842085 0.0002234966 -0.0000991669 -0.0014226182 -0.0014932930 -0.0028220722 0.0046094119 -0.0052476885 -0.0057428634 -0.0055707485 -0.0036600132 -0.0030305302 0.0062168475 0.0035302680 0.0013403277 -0.0012045028 0.0004731844 0.0031492313 -0.0066668183 -0.0041430568 -0.0025730004 0.0071234806 0.0043878773 0.0022851523 0.0181802036 0.0060124225 -0.0092632389 0.0006039653 -0.0128137733 -0.0118519963 -0.0022439536 0.0001433746 0.0007483346 0.0105884684 0.0029996262 -0.0075310708 -0.0046200117 -0.0065895798 -0.0155510970 0.0003914293 -0.0004327419 -0.0006446635 0.0002985415 0.0001202246 0.0003470930 0.0000934466 -0.0001782989 -0.0001898282 0.0020619755 -0.0000968807 -0.0010451111 0.0034766098 -0.0049798950 0.0015586703 0.0012031641 0.0057179849 -0.0026035376 0.0087009970 -0.0030039179 -0.0002030923 -0.0066359058 0.0027384817 0.0000548683 -0.0166027081 -0.0016621334 0.0028157288 -0.0050732852 -0.0024864138 0.0016933060 0.0107765669 -0.0011224280 -0.0016256266 -0.0036983138 0.0012931585 0.0001961812 -0.0265502433 0.0032554451 0.0052870143 -0.0133472346 -0.0111006764 0.0063706661 0.0005099074 0.0002955038 0.0006845680 -0.0009037365 0.0002361106 -0.0014148206 0.0011905589 -0.0005905973 0.0022819598 -0.0012317382 0.0003137218 -0.0021374740 -0.0028339287 -0.0024538943 -0.0023933336 -0.0003523493 -0.0032645240 0.0014760986 0.0024039513 0.0007244900 0.0030072722 -0.0003574590 0.0004645294 -0.0008829702 -0.0065445338 -0.0029039719 -0.0072760915 -0.0038291815 -0.0065332685 -0.0009125942 0.0088013372 -0.0004885593 0.0057553977 -0.0925626412 0.0364295252 -0.0176697337 -0.0198249134 -0.0299339054 -0.0907097359 0.0374782530 0.0196717806 0.0113223833 0.0104116277 -0.0280224248 -0.0082822449 0.0695739774 0.2930138570 0.0709185314 0.1208632654 -0.0046097995 0.1406641857 -0.2305567910 0.1055118146 -0.1262168577 -0.0000678090 -0.0030910946 0.0011568250 0.0063660815 0.0010572719 -0.0009527536 -0.0011048342 0.0015397262 -0.0003794016 -0.0028798689 0.0012484469 -0.0003358073 0.0028123883 0.0007027668 -0.0004153420 0.0002261716 -0.0001046091 0.0006584408 -0.0001018211 -0.0008645237 0.0000241647 -0.0004856800 -0.0000413361 -0.0006976997 0.0007591096 0.0003259592 0.0005719323 0.0005684425 0.0004102368 0.0002437598 -0.0001884801 0.0002257278 -0.0003781258 -0.0003379182 0.0001161568 0.0000610515 -0.0005950893 -0.0006677128 0.0007582486 0.0007318871 0.0005901102 -0.0007600389 0.0000737975 0.0007479758 -0.0006439140 -0.0179283113 0.0059983378 0.0128060874 0.0100169636 0.0091879408 -0.0025283973 -0.0042271303 -0.0028332453 0.0015386334 0.0005264704 -0.0027845119 -0.0012715619 0.0011874597 0.0002261570 -0.0008419411 0.0015829161 0.0012720928 -0.0005469584 0.0007314479 0.0014227619 0.0002297474 0.0017834504 -0.0003330982 -0.0000189857 0.0016521511 0.0082230824 0.0026039818 0.0022521333 0.0014731762 -0.0016678048 0.0010966967 -0.0043593866 -0.0007012742 -0.0045345447 -0.0021153703 0.0027708344 0.0026433468 0.0064547498 -0.0003778656 0.0256777473 -0.0105171086 -0.0312794784 0.0048752299 0.0005322619 -0.0018639819 0.0016217912 0.0008269021 -0.0006369546 0.0004892102 -0.0026290798 -0.0007753940 -0.0025728179 0.0013540995 0.0013447106 0.0024938155 -0.0030143492 -0.0014916652 -0.0022038535 0.0027936213 0.0012528910 -0.0143241506 0.0064618039 0.0096082096 -0.0031485844 -0.0028789250 0.0004839524 -0.0064362054 0.0021376019 0.0029104660 -0.0029347725 -0.0079394994 0.0009234248 -0.0114074683 -0.0072285082 0.0042032374 -0.0013485665 0.0020526630 0.0003139576 0.0002271968 -0.0356985402 -0.0017057328 0.0001950882 0.0001827293 0.0007181359 -0.0058355801 0.0066002367 -0.0100782077 0.0043014013 0.0042738246 0.0014029179 -0.0024784421 -0.0024479129 -0.0005823295 -0.0006040923 -0.0001663197 0.0011145773 -0.0045839556 -0.0018000522 0.0043174623 0.0001711189 0.0017596526 -0.0000659907 0.0003571918 -0.0011079975 0.0010474869 -0.0002603101 0.0001505061 0.0020670044 0.0052169310 0.0030774496 0.0122897165 0.0776589480 0.0301747066 -0.0034299565 0.0270814934 -0.0231313008 -0.0622804560 -0.0329390737 0.0191037814 0.0053500895 -0.0131466493 -0.0074525794 0.0044516384 0.0054334077 -0.0178694609 -0.0050007309 0.0095950843 0.0040057152 -0.0050336443 0.0143654615 0.0112881479 -0.0034394729 -0.0083231774 0.0177425221 -0.0092400577 -0.0051155790 -0.0111663693 -0.0048373850 -0.0936117732 0.0030047673 -0.0143402993 -0.0487184860 0.0349477778 -0.1217845803 0.0697212885 -0.0862711780 -0.0509559782 -0.0013036130 0.0009221733 -0.0002731996 0.0009392022 -0.0002292901 0.0002981751 -0.0013502781 0.0009014875 0.0005189345 0.0090891168 -0.0030133241 -0.0007256384 -0.0017144766 0.0001069042 -0.0004258545 0.0004749295 -0.0003388669 -0.0002376528 -0.0021245359 0.0005696854 -0.0015972819 0.0026412648 -0.0027840456 -0.0022066948 -0.0396713300 0.0115699440 0.0053553151 0.0046074574 0.0004435623 0.0018426972 -0.0017575439 0.0022665145 0.0011197108 -0.0011376585 -0.0005120092 0.0000740797 0.0010840795 0.0004088095 0.0000745707 -0.0034856941 -0.0018392902 -0.0012451524 -0.0006699168 -0.0002405694 0.0003018094 0.0003465572 0.0000284103 -0.0006129717 0.0052724987 0.0023899723 -0.0015579445 0.0011435618 -0.0029137582 -0.0014398666 0.0169630841 0.0081448867 0.0046911920 0.0007507593 0.0000058410 0.0001407955 0.0019221281 0.0014148427 0.0014567350 0.0100589741 -0.0143772613 -0.0195767696 0.0195049241 0.0057897496 0.0155001156 -0.0014566125 -0.0059731628 -0.0096147741 -0.0110647127 -0.0001710012 0.0061502222 0.0012305951 -0.0013328492 0.0003284482 -0.0001542699 0.0011557282 -0.0004578140 0.0012968510 -0.0006122385 0.0000331349 -0.0015210428 0.0008649960 -0.0000709396 -0.0013766267 -0.0005573175 0.0003847224 -0.0002291996 -0.0019552910 0.0008169624 0.0018162461 -0.0004427990 -0.0001862880 -0.0001776655 0.0004714077 -0.0001399458 -0.0050661922 0.0003232250 0.0012422851 -0.0029519039 -0.0033666121 0.0017509611 0.0005782895 0.0002495278 0.0007265662 -0.0004652301 0.0004030187 -0.0009543492 -0.0004825787 -0.0006794350 -0.0002977221 -0.0002174887 0.0004381932 -0.0006785268 0.0015823475 0.0003609909 0.0028051110 0.0006317781 -0.0026815035 0.0030819152 0.0000984567 -0.0005486101 0.0005744384 0.0006153319 0.0009001767 0.0002317443 -0.0008824325 -0.0010432364 -0.0004120623 -0.0015434769 -0.0035577846 0.0004622947 -0.0315207684 0.0148348637 -0.0372026042 0.5290347841 -0.3014117749 0.1762169581 0.1596220102 0.2277986948 0.5288841750 -0.2607886366 -0.1930378222 -0.1261394272 0.0068399342 -0.0104804853 0.0099822811 -0.0311534258 0.0865631599 0.0666877630 -0.0157367229 -0.0606024243 -0.0846286017 -0.0322872046 0.0954563199 -0.1260873907 0.0006549315 0.0110467660 -0.0044968788 -0.0142429855 -0.0077144140 0.0034322223 -0.0027201089 -0.0076992285 0.0025531700 0.0010279845 -0.0143603140 0.0068197648 -0.0026776261 0.0056582784 -0.0016148810 -0.0012344412 0.0002943310 -0.0027397441 0.0033583931 0.0108742004 -0.0038027653 0.0044138142 0.0017660028 0.0045287008 -0.0054743325 -0.0034366118 -0.0036153256 -0.0053436097 -0.0020979071 -0.0047106415 0.0004926696 -0.0011301436 0.0011513540 -0.0018011876 -0.0039960134 -0.0001996042 0.0026064004 0.0028452957 -0.0004767629 -0.0034618660 -0.0021667708 0.0021151118 -0.0019577268 -0.0032723238 -0.0004159358 -0.0250835003 0.0108769026 0.0322665153 -0.0520876910 -0.0337318876 0.0182461973 0.0164975156 0.0219497925 -0.0020710900 -0.0039146435 0.0243305178 0.0132411508 -0.0074097140 -0.0120893729 0.0010987348 0.0007821113 -0.0057321337 -0.0029746023 -0.0049070818 -0.0176501322 -0.0035211930 -0.0040828833 -0.0024449646 -0.0040422907 -0.0116727687 -0.0087641652 0.0002930054 -0.0407160239 0.0098230562 0.0319140199 -0.0059436325 0.0340305168 0.0213874273 0.0049250674 -0.0128679598 -0.0095592808 0.0100795372 0.0044920363 -0.0026148387 -0.0134449636 0.0236055600 -0.0008114931 -0.0259678241 -0.0129314877 0.0098525672 -0.0254621862 -0.0182830446 0.0081074185 0.0040785424 0.0156136486 0.0005792958 0.0159247970 -0.0112168679 -0.0095319473 -0.0100482535 0.0220519771 0.0077945785 0.0164396062 -0.0066814721 -0.0079502029 0.0405102574 -0.0038724591 -0.0173648710 0.0228606506 -0.0114938732 -0.0025238041 0.0274553486 0.0043607943 -0.0103639825 0.0225038118 0.0535401664 -0.0006560684 0.0970228071 0.0560892070 -0.0327187028 0.0073080739 -0.0088619771 -0.0011583003 -0.0104438971 0.1852825737 0.0283208991 -0.0013608232 -0.0006315617 -0.0011390079 -0.0027265410 0.0074425760 -0.0031120067 0.0013746148 -0.0052658441 -0.0032505819 -0.0021238775 -0.0001816527 0.0003569176 0.0009716521 -0.0001712307 -0.0007787946 -0.0038664585 -0.0018129795 0.0037049564 -0.0035820120 -0.0093912715 0.0044243724 0.0017085814 -0.0016656435 0.0018416066 0.0007667874 0.0014762037 0.0011869414 0.0059521156 -0.0016455931 0.0041120093 0.0567640496 0.0278761772 -0.0061842232 0.0197068662 -0.0174249414 -0.0458705953 -0.0220966915 0.0154439589 0.0067317810 0.0719253591 0.0455286921 -0.0063451456 -0.0316737139 0.0746203163 -0.0301016770 0.0107462831 -0.0119376978 0.0025727774 0.0098912795 0.0099475701 0.0152395361 -0.0065298279 0.0194190775 -0.0282355232 -0.0297754186 -0.0036900798 -0.0064558174 -0.0931938376 0.0047584206 -0.0125832943 -0.0133140405 0.0656033036 -0.0459896746 0.0096897007 -0.0604108239 -0.0017157126 0.0153922506 -0.0039743993 0.0037076898 -0.0147114811 0.0016819935 -0.0050842580 0.0166452418 -0.0112832887 -0.0059047131 -0.1094221468 0.0397457344 0.0128680022 0.0167610811 -0.0026804439 0.0019665073 -0.0060393237 0.0034927818 0.0028888451 0.0488810886 -0.0042577571 0.0224914522 -0.0294019668 0.0356622559 0.0240848623 0.4916296318 -0.1441702215 -0.0679552784 -0.0482782789 -0.0075469252 -0.0213537075 0.0286304697 -0.0327815104 -0.0192806632 0.0039638521 0.0014011193 -0.0018269766 -0.0010852202 0.0004531851 0.0021697986 0.0072629050 0.0038965767 0.0023215652 0.0000179649 -0.0009261067 -0.0026723878 0.0029265753 0.0029774808 0.0054237616 -0.0142576975 -0.0066467234 0.0022546565 -0.0035733450 -0.0084380644 -0.0023906032 -0.0446983176 -0.0225070419 -0.0144588387 -0.0064902717 -0.0031851781 -0.0020979908 -0.0113729196 -0.0089802520 -0.0141118885 -0.1247333344 0.1785296388 0.2431366392 -0.2418484205 -0.0716844446 -0.1918121167 0.0039314493 0.0167210073 0.0271134151 0.0298389643 0.0001846116 -0.0162615601 -0.0046740210 0.0048421255 -0.0008021692 0.0034481198 0.0007868265 -0.0009308368 0.0052020215 -0.0002643752 -0.0007106941 0.0015825260 -0.0041894188 0.0012698166 -0.0238261148 0.0023808824 0.0030572728 -0.0094178137 0.0154903110 -0.0043476031 0.0045983117 0.0009291377 -0.0011574480 -0.0049891714 -0.0001824872 0.0009781667 -0.0069312411 0.0026653766 -0.0000201921 -0.0008233489 0.0075442994 -0.0023345747 -0.0036188279 -0.0021842926 -0.0037278305 0.0001071753 -0.0050847791 0.0044344621 0.0059249331 0.0044487070 0.0061972047 -0.0006630571 -0.0022572828 0.0007309695 -0.0163512167 -0.0062394576 -0.0244692482 -0.0052643645 0.0135836891 -0.0192927940 0.0030116337 0.0055607640 0.0000967740 -0.0048524294 -0.0062453741 -0.0024519756 -0.0038901780 0.0035993559 -0.0088496137 0.0060737977 0.0168189286 -0.0042453110 -0.0168915775 0.0047023086 -0.0259648337 0.3256624545 -0.1432961206 0.0715040654 0.0903516084 0.1066766483 0.3637675677 -0.1954466009 -0.0688471676 -0.0345181075 0.0050674142 -0.0102231744 0.0072592215 -0.0232954820 0.0955164819 0.0616790891 -0.0023963716 -0.0552428540 -0.0626221059 -0.0341475020 0.0872100502 -0.1153511102 -0.0001496271 0.0010726075 -0.0003556962 -0.0025563914 -0.0001421242 0.0003384637 0.0007368036 -0.0004128366 0.0000597282 0.0013352161 -0.0001699571 -0.0000705967 -0.0013441218 -0.0005672222 0.0002912756 -0.0002858459 0.0001007141 -0.0005378855 0.0002009734 0.0002029904 0.0003488205 0.0002485309 0.0001436732 0.0001931310 -0.0002965940 -0.0003890914 0.0000739027 -0.0006887654 -0.0001743733 -0.0006718421 0.0000714172 -0.0000509517 0.0001668698 0.0002780917 0.0001520325 -0.0000920366 0.0001496975 0.0000135781 0.0000346379 -0.0001198708 -0.0000148221 0.0000115109 -0.0001004639 -0.0000253444 -0.0001084597 -0.0001949545 0.0006241399 0.0012645528 -0.0024432764 -0.0018131662 0.0007956674 0.0007520201 0.0008442581 -0.0001689884 0.0001664865 0.0007137922 0.0000889418 -0.0003332448 -0.0001438116 0.0001837949 0.0000574726 -0.0003516570 -0.0001555918 -0.0002843223 -0.0005719415 0.0000118986 -0.0003593682 -0.0004349626 -0.0000869139 -0.0004332728 -0.0013380230 -0.0002761987 -0.0018135282 0.0003269024 0.0013527418 -0.0009267534 0.0015094118 -0.0002130264 0.0005589613 0.0000446789 -0.0002086458 -0.0015875294 -0.0006324699 -0.0006463888 0.0026805816 -0.0043457519 0.0057875956 0.0028510116 0.0034854916 -0.0003948072 0.0031335598 0.0030132290 -0.0013236364 0.0010793640 -0.0037729725 -0.0014347046 -0.0031192189 0.0018235603 0.0018206998 0.0035127368 -0.0057076686 -0.0019877494 -0.0024206569 0.0032980940 0.0011163673 -0.0074206368 0.0011742975 0.0052505200 -0.0044088626 -0.0037931779 0.0005900180 -0.0196055074 0.0083156230 0.0084516428 -0.0026150341 -0.0092583727 0.0033925923 -0.0191269250 -0.0110552090 0.0084670529 0.0002727143 -0.0001095843 -0.0000077742 -0.0002390922 0.0046609923 0.0001515338 0.0001495015 0.0000810532 -0.0002474194 0.0014710689 -0.0066497886 -0.0009206050 -0.0093061094 0.0037157346 0.0076286142 0.0017908154 0.0016599131 -0.0001780133 0.0005119903 -0.0004183440 0.0003667082 -0.0000258664 -0.0000587352 -0.0000554015 0.0005406976 -0.0007864880 -0.0003094078 0.0026074877 -0.0023715625 0.0021372375 0.0108259112 -0.0076258762 0.0053804156 0.0231293733 -0.0261312492 0.0375895652 -0.0006391416 -0.0005742046 0.0002519921 -0.0004874645 0.0014918239 -0.0009747554 -0.0012515461 -0.0002979687 -0.0008032706 0.0038454673 0.0009292001 -0.0083393304 -0.0014211639 0.0098231353 0.0101960082 -0.0141374045 0.0011577081 0.0023755043 0.0152245449 0.0148350321 0.0198213418 -0.0099789744 0.0284935013 -0.0408219755 -0.0439662198 -0.0097627242 -0.0115761023 -0.4749213210 0.1890722090 0.1730876218 -0.1920352386 0.4091101049 -0.5214685468 0.2948234336 -0.1868032085 -0.2312979842 0.0000449856 -0.0003021868 -0.0000319178 -0.0000188928 0.0001221265 0.0000847838 0.0001970325 -0.0001514174 -0.0001037302 -0.0003950262 0.0000195842 -0.0000995044 -0.0000230492 0.0001496801 0.0001325330 0.0002615754 -0.0001412535 -0.0000664697 -0.0003169836 0.0000714849 0.0000673289 -0.0005889313 0.0005783584 0.0004066600 0.0010934368 -0.0002167450 -0.0000588526 -0.0003215215 0.0000851502 0.0001505489 -0.0005965158 0.0005372819 0.0005495669 0.0003354839 0.0001856839 0.0000852210 -0.0003111233 -0.0001370456 0.0000424910 0.0002193891 0.0000660961 -0.0000761480 0.0002575775 0.0001378765 0.0000130273 -0.0002072080 -0.0001021057 0.0000620025 -0.0011167501 -0.0004005978 0.0004490288 -0.0003418344 0.0004755113 0.0002706880 -0.0009540786 -0.0005259466 -0.0003213660 -0.0005193395 -0.0002196610 0.0002256877 -0.0001110412 0.0000560656 0.0002669710 -0.0002342078 0.0003240287 0.0004847586 -0.0004986624 -0.0001733362 -0.0004408071 0.0000912839 0.0003836198 0.0005999260 0.0006035432 0.0000321405 -0.0003455899 -0.0002971284 0.0005217532 -0.0001677313 -0.0001678238 -0.0005596450 0.0002651654 -0.0008238002 0.0002071112 0.0000491452 0.0005518915 -0.0001477997 -0.0000362104 0.0015824215 0.0000627432 -0.0002355829 0.0006197207 -0.0000751718 -0.0000674730 -0.0009176046 0.0001073722 0.0001354996 0.0003258361 -0.0001454353 -0.0000063165 0.0021928738 -0.0002788184 -0.0004849591 0.0011490402 0.0009032563 -0.0005166645 -0.0000938840 0.0000993346 -0.0002556534 0.0000725260 -0.0001584115 0.0002436653 -0.0001908274 0.0000398864 -0.0003249954 0.0001895109 -0.0000279789 0.0003207972 0.0002976134 0.0002662232 0.0002338356 0.0001033124 0.0004170312 -0.0001560214 -0.0003212576 -0.0000693355 -0.0004248439 0.0000310969 -0.0000898071 0.0001216619 0.0008244815 0.0003951613 0.0008633905 0.0005827567 0.0009829092 0.0001024176 0.0031012854 0.0019752010 0.0113161628 -0.1054870064 0.0204294073 0.0010405338 -0.0259082206 -0.0119408488 -0.1504245722 0.0950673030 -0.0109275234 -0.0187599943 -0.0015051274 0.0018560638 -0.0023961877 0.0079294982 -0.0082467537 -0.0112850730 0.0085900969 0.0122970930 0.0228554688 -0.0046015603 -0.0163852797 0.0234806942 -0.0059567753 0.0081083014 -0.0025267303 -0.0196182007 -0.0004196508 0.0024193971 0.0080812104 -0.0030119112 0.0001613178 0.0083652810 -0.0107010072 0.0057119277 -0.0095431960 -0.0026040216 0.0014101039 -0.0020637700 -0.0065018582 0.0032439408 -0.0006747807 0.0115353528 -0.0092526467 -0.0022233848 0.0035381188 -0.0081665529 -0.0000359943 -0.0058159295 0.0066498321 0.0002742927 0.0062591586 -0.0047619788 -0.0014687093 0.0027301594 -0.0022033194 0.0021119761 0.0012663160 -0.0009635074 0.0009725564 -0.0021886583 0.0046539334 0.0006637577 0.0020214062 -0.0021792762 -0.0025023003 0.0012417440 -0.0063627097 0.0098789686 -0.0071700306 -0.0103997534 -0.0239983520 -0.0225238197 0.0073101165 0.0109544327 0.0081647875 -0.0043985454 0.0036438285 0.0092664881 0.0007789279 -0.0059479604 0.0058056159 0.0052369463 0.0001758568 -0.0068111397 -0.0011777299 -0.0042770039 0.0002508919 0.0035028019 -0.0016788650 -0.0081576655 -0.0032821721 -0.0037676394 -0.0376320394 -0.0064464208 -0.0317634046 0.0080555053 -0.0040278383 -0.0086740327 -0.0052017462 -0.0046525505 0.0027251188 -0.0020025274 -0.0027243189 -0.0031470287 -0.0004127998 0.0015186630 -0.0175392096 0.0094427478 0.0175319612 0.0003217884 0.0009284996 0.0002454819 0.0023047499 0.0021086994 -0.0006754997 0.0007502324 -0.0032863913 -0.0010192300 -0.0018835889 -0.0004568983 0.0005368837 0.0023638922 -0.0032561597 -0.0014750661 -0.0013964409 0.0034329734 0.0012247138 0.0052587691 -0.0064782520 0.0014387029 -0.0013055013 0.0054579143 0.0036722093 -0.0172198131 0.0094903924 0.0086091907 -0.0026423501 -0.0079537716 -0.0011800394 -0.0120752020 -0.0066612079 0.0045877129 0.0033164130 -0.0026448853 -0.0004952019 -0.0085503767 0.0540121104 0.0134788298 0.0146504391 0.0096603207 0.0097719569 -0.0115646279 0.0014389155 0.0079145091 -0.0065794079 0.0146832603 0.0114215873 -0.0049835148 -0.0037242041 -0.0004555053 0.0013959278 -0.0002641556 -0.0004560579 0.0029616959 0.0028187716 -0.0034734221 -0.0030038562 0.0011369606 0.0008479622 -0.0019713831 0.0004491662 -0.0002145773 0.0118733074 -0.0097070421 -0.0126919052 0.0078511209 -0.0097124924 -0.0171677597 -0.0581801047 -0.0293643322 0.0097046033 -0.0182976837 0.0165179030 0.0413733954 0.0219806801 -0.0202744115 -0.0108396237 0.0069689994 0.0089522333 0.0158627635 -0.0020068352 -0.0110694063 -0.0241494937 0.0354152648 -0.0095159954 -0.0015009730 0.0036337522 0.0031008783 -0.0080788996 -0.0003892698 -0.0032651506 0.0109635820 0.0178258122 -0.0012111929 0.0032249033 -0.0645373459 0.0196363054 0.0068395844 0.0844986588 0.1347428027 0.1630162145 -0.1501648223 0.0408052247 0.1287180964 0.0018348038 -0.0020397798 0.0005123523 0.0010448437 0.0008007443 0.0012883094 0.0023797658 -0.0027303493 -0.0021707377 -0.0143410768 0.0044406347 0.0004899642 0.0017509005 0.0016296855 0.0022811790 0.0027499091 -0.0026641231 -0.0014931208 -0.0045162265 0.0006056355 -0.0003128385 -0.0108917719 0.0098414921 0.0058009530 0.0519390373 -0.0156779727 -0.0079647199 -0.0113823236 0.0015258184 -0.0020819816 -0.0052296110 0.0047733894 0.0032554046 -0.0091606168 -0.0018492868 0.0061132059 0.0060069022 -0.0003197931 -0.0009062195 -0.0805712660 -0.0437082473 -0.0279811226 0.0029269782 0.0039240357 0.0052942585 -0.0053720610 -0.0077159039 -0.0171306221 0.0627994069 0.0279246908 -0.0098029106 -0.0040587902 0.0082704504 -0.0153863348 0.3807415312 0.1933772232 0.1268510255 -0.0012428851 -0.0069395652 0.0123441090 0.0451666146 0.0398346544 0.0532050683 -0.0132762066 0.0188277605 0.0256148109 -0.0248559988 -0.0072780361 -0.0194430959 -0.0340833101 -0.1410840054 -0.2278788014 -0.2488784594 -0.0024174720 0.1341049646 -0.0015226436 0.0066938897 -0.0023987593 -0.0031610205 -0.0015651076 0.0008398052 0.0008628685 -0.0029477349 0.0010055120 -0.0020764182 0.0030588333 -0.0008342683 -0.0045188038 -0.0030458413 0.0019544296 0.0036326462 -0.0085696290 0.0027728844 0.0036567291 -0.0007309596 -0.0005111938 -0.0006366411 -0.0000727976 0.0001249573 -0.0146653276 0.0014000974 0.0037734173 -0.0038273127 -0.0044272748 0.0024803188 0.0045074241 0.0004617034 0.0065342421 -0.0058855484 -0.0028772452 -0.0051541676 0.0033992075 -0.0013930294 0.0064924049 -0.0050118930 -0.0003271344 -0.0076089325 -0.0057448698 -0.0061850353 -0.0037185270 -0.0019888747 -0.0143352028 0.0072982586 0.0059862114 0.0003886933 0.0085771160 0.0027287178 0.0071432478 -0.0014499309 -0.0233546536 -0.0118430982 -0.0246019114 -0.0166475432 -0.0316326234 -0.0006875164 -0.0078245566 0.0231112874 0.0255057737 -0.1346196268 -0.2135528020 0.2039807513 0.0176041192 0.1626826186 -0.3579744876 0.2745173534 -0.2744759542 -0.2450154797 -0.0055153212 -0.0045015775 -0.0051656670 0.0723214975 0.0626531171 -0.0280864557 0.0796498209 -0.0067606996 0.0845435544 -0.0235235885 -0.0037897130 -0.0034261830 0.0003283079 -0.0025073815 0.0007321292 0.0063737701 -0.0000125661 -0.0007710431 -0.0018151212 0.0007164865 -0.0000286964 -0.0035439196 -0.0007558003 0.0010895130 0.0038777301 0.0018387108 -0.0009498874 0.0010143863 -0.0016064693 0.0030312023 -0.0014214931 0.0006034795 -0.0031772237 -0.0016643894 -0.0001236102 -0.0023346569 0.0018126056 0.0012291720 0.0009470725 0.0037044914 0.0019809889 0.0026882647 -0.0006229135 0.0007191399 -0.0010057422 -0.0010949227 -0.0004704924 0.0003053024 -0.0002334929 -0.0003782100 0.0001120599 0.0001815024 0.0003193179 -0.0003747934 0.0002678873 0.0000910763 0.0001385166 0.0209881838 -0.0138982430 -0.0223647132 0.0108490235 0.0040946163 -0.0046932676 -0.0002554635 -0.0043735582 -0.0014208285 0.0001807722 -0.0068313885 -0.0028992005 0.0009339657 0.0023838679 0.0001355798 -0.0034478345 0.0023006232 0.0033262724 0.0013887231 0.0035186582 -0.0002947176 0.0009718261 0.0038912560 0.0008945119 0.0019106553 -0.0030594711 -0.0015901155 0.0129103205 -0.0036750653 -0.0139274618 0.0053580124 -0.0034014951 0.0019727908 -0.0039869255 0.0043023547 0.0041521366 0.0019008188 -0.0032069210 0.0017841119 -0.0001184529 -0.0002326053 -0.0154478115 -0.0032442158 -0.0037992374 -0.0002604679 -0.0039896365 -0.0041244935 0.0011070350 -0.0016565303 0.0063017822 0.0020789592 0.0046519180 -0.0009166232 -0.0020274824 -0.0054190905 0.0071448662 0.0033782776 0.0034927442 -0.0055444732 -0.0024457520 0.0016824298 0.0047144531 -0.0070619541 0.0048997533 -0.0003255047 -0.0035567124 0.0266024515 -0.0129138213 -0.0128716891 0.0056383570 0.0137399818 0.0010337205 0.0245571389 0.0132465188 -0.0090306700 -0.0007650262 -0.0014122793 -0.0002737723 0.0011533165 -0.0060113689 -0.0026048261 0.0012212974 0.0010178397 0.0024982527 0.0185351011 0.0092075813 -0.0108123085 0.0010944376 -0.0275953432 -0.0173007702 0.0072847788 0.0063855210 0.0007937528 -0.0003795672 0.0000106067 0.0002170912 -0.0083874470 -0.0046121755 0.0034528274 -0.0007998425 -0.0004348718 -0.0006088603 0.0010608722 -0.0004994958 0.0004720491 -0.0127439218 0.0112155071 0.0142046447 -0.0113765029 0.0066096988 0.0174365216 0.1023249222 0.0610504666 -0.0221389340 0.0299094133 -0.0437044010 -0.0570579843 -0.0168202810 0.0452458678 0.0345276719 0.0045809495 0.0036222672 0.0041814672 -0.0012564054 0.0021547529 0.0029531029 0.0014803727 -0.0053042351 0.0031816930 -0.0002522105 0.0001075639 0.0055399911 -0.0005974420 0.0038477479 -0.0112644356 -0.0136911488 -0.0009170931 -0.0028423469 0.0960578200 -0.0051990650 0.0231422112 -0.0927222405 -0.1444315806 -0.1748098521 0.1720042616 -0.0055852516 -0.1512786781 0.0002348885 0.0009420737 0.0004456068 0.0002097588 -0.0004854805 -0.0003416679 -0.0006229868 0.0002202581 -0.0000200446 -0.0003552706 0.0006666611 0.0007316574 0.0004987281 -0.0005368914 -0.0003425753 -0.0009775963 0.0004220635 0.0000768733 0.0000567165 -0.0003909132 -0.0006379535 0.0011501540 -0.0015251803 -0.0011394605 0.0036290551 -0.0009891307 -0.0003047781 -0.0003501305 -0.0004940401 -0.0009379891 0.0019089304 -0.0021955149 -0.0018860957 -0.0026458969 -0.0010293201 0.0004042893 0.0017350396 0.0003087001 -0.0004812239 -0.0112801984 -0.0058643571 -0.0028153179 -0.0005836596 0.0000859792 0.0005992745 -0.0000983101 -0.0008820892 -0.0029669344 0.0138855334 0.0047754552 -0.0031205218 -0.0020900123 0.0059801193 -0.0038553267 0.0535567372 0.0275056091 0.0182020319 0.0031887838 0.0006033310 0.0004469438 0.0070424174 0.0053267991 0.0065552264 -0.0008921341 0.0012325524 0.0016643142 -0.0019572505 -0.0005541425 -0.0015196155 -0.0048538020 -0.0201079265 -0.0324555689 -0.0350393165 -0.0003718832 0.0188533045 0.0003037822 -0.0007732411 0.0002804032 0.0003317429 0.0015768496 -0.0008037140 0.0031455732 -0.0008376322 -0.0001660068 -0.0018314115 0.0004354883 0.0001384502 -0.0069433104 -0.0001965474 0.0010291781 -0.0023964340 0.0007360902 0.0000962054 0.0035084523 -0.0003100903 -0.0005324257 -0.0014223169 0.0004105567 0.0001031817 -0.0084243676 0.0010421386 0.0016134717 -0.0039097750 -0.0026152414 0.0016285547 0.0013983238 -0.0002090829 0.0024500189 -0.0014224676 0.0002716144 -0.0021888691 0.0012252540 -0.0005296212 0.0023631087 -0.0016820635 0.0000997837 -0.0027090723 -0.0019491226 -0.0022106762 -0.0013140760 -0.0006062104 -0.0046756246 0.0023665984 0.0022971997 0.0001486922 0.0033206791 0.0005207938 0.0018597396 -0.0006563408 -0.0073360196 -0.0039236706 -0.0076478070 -0.0054982246 -0.0102853953 -0.0004387001 0.0153969930 -0.0326829288 -0.0250596753 0.0723837964 0.3173844436 -0.2836862515 -0.0510797489 -0.2488126233 0.3649140448 -0.3166893009 0.3717023697 0.3288320323 -0.0085806034 0.0177141326 -0.0033268163 0.0049289413 -0.1899112004 -0.0878508626 -0.0521844810 0.0763645315 0.0338431298 0.0857386093 -0.1257103910 0.1653910031 0.0591431996 -0.1138091720 0.0329560943 0.3022788581 -0.0117653493 -0.0289450223 -0.1085842490 0.0266727917 0.0028236949 -0.1629697899 0.0156660566 0.0182383463 0.1856764257 0.0840835102 -0.0427667088 0.0608666963 -0.0376769107 0.1223728373 -0.0646406742 -0.0315620352 -0.0938655147 -0.0614144021 -0.0246401165 -0.0574260345 0.0780316598 0.0867379313 0.0075942132 0.1647129838 0.0575507058 0.1547171207 -0.0234749479 0.0179727806 -0.0388615791 -0.0562342766 -0.0326738412 0.0138333669 -0.0070687879 -0.0028053868 -0.0060353563 0.0096050227 0.0057623149 -0.0038559441 0.0056721963 -0.0033363181 0.0142097641 -0.0044361734 0.0053543885 0.0089663591 0.0116285042 0.0151397678 -0.0027614432 -0.0054068552 -0.0007835567 0.0031506362 -0.0060105941 -0.0036410451 0.0027871645 0.0011755064 -0.0058903191 -0.0024945204 0.0040968611 0.0024383894 -0.0016924398 0.0015920853 -0.0018265326 -0.0016246569 0.0033485017 0.0026014548 -0.0011929040 -0.0013801001 0.0202706839 0.0036000768 -0.0028277398 0.0062580858 0.0040940673 0.0014650930 0.0157693663 0.0051704315 -0.0018556494 0.0026670370 0.0024794801 0.0056057114 -0.0053176034 -0.0047664246 -0.0134052543 0.0089144168 0.0107939309 0.0032215548 0.0045060833 -0.0010194948 0.0031621075 0.0009168434 -0.0012191358 -0.0015896145 -0.0043203026 0.0000811190 -0.0027858432 0.0040774594 0.0019101007 0.0017360602 -0.0055633154 -0.0015197347 -0.0013657238 0.0072186919 0.0015918588 -0.0027181113 -0.0047674241 0.0003434780 -0.0045071482 -0.0173927486 -0.0021192983 -0.0122507303 0.0024907759 0.0055867950 -0.0030922871 -0.0219629348 -0.0019694137 -0.0171823468 -0.0117970550 0.0055766975 -0.0025530992 0.0006515022 0.0008356366 0.0117183699 -0.0027438665 -0.0201622473 -0.0183426891 -0.0141312392 0.0274088587 -0.0016230740 0.0007386539 0.0034141371 0.0012470754 -0.0009392846 -0.0010852262 0.0002593270 0.0001560112 0.0000398453 0.0014272058 -0.0002074857 0.0001956501 0.0089954324 0.0094885183 -0.0057477425 0.0060451456 -0.0107679595 -0.0028900106 0.0015660895 0.0006556697 -0.0014187944 -0.0017111147 -0.0005754375 0.0007168447 -0.0040694811 -0.0008612642 0.0024291678 -0.1290281907 -0.1043622937 0.0475919097 -0.0396069406 0.0531401444 0.0791809005 0.0339774727 -0.0754003093 -0.0536307473 0.0547300606 0.0214793740 -0.0573583455 -0.0237239758 0.1215367155 0.0740434151 -0.1199980332 0.0049946818 0.0212884440 -0.0160136597 -0.0099243673 0.0225232080 0.0078043379 -0.0111013654 -0.0099397916 -0.0225231537 0.0118314751 -0.0014458006 0.0446244924 0.0143361688 0.0317438017 -0.0176285812 -0.0311847352 -0.0305864861 0.0398300010 0.0367763574 -0.0373432400 0.0012477391 0.0337572183 0.0068316894 -0.0207448942 -0.0133814781 -0.0208694400 -0.0176397257 0.0196872705 0.0164420885 0.0337934051 0.0039572998 0.0178680153 -0.0045063599 -0.0233347424 -0.0267413579 -0.0390131747 0.0296294132 0.0155621363 0.0947677196 -0.0090645167 0.0078630937 0.0914850192 -0.0741500481 -0.0530736714 0.0042050281 -0.0004360945 0.0014063678 0.0748473401 -0.0278999991 -0.0034786869 0.1046305152 -0.1058644585 -0.0738155009 -0.0519273625 -0.0256696703 0.0005970547 0.0232388924 0.0036312009 -0.0293596230 0.0167875414 0.0171358827 0.0332435700 -0.0327827857 -0.0126478455 0.0097910203 0.0051609744 -0.0038994398 -0.0319773144 0.1578377498 0.0653531945 -0.0488950702 0.0698332002 0.0318136597 0.0211583528 -0.0054342247 0.0001050980 0.0001648970 0.1289648872 0.0523724997 -0.0263891809 0.0577957457 0.0223946734 0.0285615482 -0.0010130977 0.0016735790 0.0022789248 -0.0078543084 -0.0020343431 -0.0059163853 -0.0008494266 -0.0031175316 -0.0046284934 0.0021317160 -0.0000775820 -0.0008913641 -0.0037999557 -0.0550849575 0.0228015081 0.0406448718 0.0598726346 -0.0338975780 0.1124642279 -0.0066156895 -0.0150201871 -0.0412323836 -0.0139302266 0.0122116793 -0.2484161129 0.0220330953 0.0260605953 -0.1241755143 0.1226038111 -0.0267537810 0.1020954735 -0.0005688581 -0.0179967224 -0.0585956452 0.0084489321 0.0073778833 -0.1979259180 0.0351416111 0.0307590587 -0.0961177362 -0.0251540534 0.0250559715 0.0324693944 -0.0168919361 0.0700259577 -0.0251240706 0.0271706275 -0.0621314449 0.0398465877 -0.0087629874 0.0704177992 -0.0455607945 0.0005312922 -0.0721167572 -0.0646487405 -0.0617878680 -0.0549821534 -0.0247124680 -0.1034234474 0.0374838690 0.0667309356 0.0065049106 0.0949879931 0.0044640538 0.0384206066 -0.0234355434 -0.1867794907 -0.0999082612 -0.1913503983 -0.1438414756 -0.2572769708 -0.0176132714 0.0006539155 0.0008626508 0.0027974218 -0.0282726369 -0.0060090750 0.0088329320 -0.0029545753 0.0059490206 -0.0436697140 0.0297163930 -0.0123454863 -0.0129396142 0.0022145767 -0.0061540399 0.0048277049 -0.0131317050 0.0608359756 0.0381557643 -0.0013974172 -0.0346582701 -0.0417890273 -0.0121607179 0.0561714585 -0.0751806806 0.0033517670 -0.0088376180 0.0026727449 0.0244913415 -0.0006365060 -0.0025699284 -0.0083393636 0.0023402165 0.0001240575 -0.0129019068 0.0006183425 0.0009938912 0.0144392373 0.0064693784 -0.0031820243 0.0003004849 -0.0014956254 0.0020682908 -0.0000758506 0.0005501285 -0.0029424443 -0.0009697576 0.0007813721 -0.0018949651 0.0034274913 0.0014771751 0.0031022775 0.0019838731 0.0020695876 0.0003083368 -0.0010200239 0.0009619229 -0.0011027082 -0.0044076064 -0.0024699581 0.0007634886 -0.0001269191 -0.0007323202 0.0008968758 0.0004125292 0.0003295570 -0.0010721919 -0.0004167886 -0.0001506561 -0.0006280106 -0.0260529150 0.0127366903 0.0331378413 -0.0086300805 -0.0061133574 0.0031368147 0.0029835551 0.0037916475 -0.0005317542 -0.0011555077 0.0036935805 0.0023870182 -0.0010058948 -0.0022779964 0.0000152366 -0.0003596516 -0.0010817689 -0.0000964171 -0.0008609699 -0.0029134484 -0.0009711038 -0.0011204203 0.0005330965 -0.0005344504 -0.0017276751 -0.0028373017 -0.0007357140 -0.0049919960 0.0003432273 0.0045765451 -0.0024289354 0.0050582410 0.0000720828 -0.0011743822 -0.0052047589 -0.0003863016 0.0008378436 0.0078306620 -0.0048157864 0.0277260210 -0.0123065239 -0.0000645759 0.0007596189 0.0012270237 0.0011150421 -0.0005295768 0.0008077605 0.0002525035 0.0030152480 -0.0019814582 -0.0015600301 -0.0019087816 -0.0008726855 0.0006946055 0.0033113335 -0.0022441695 -0.0017614133 -0.0011283786 0.0005509678 0.0009235846 -0.0099096210 0.0067314149 0.0066257452 -0.0018991731 0.0028930218 0.0016934848 -0.0108006634 0.0067228871 0.0046895856 -0.0015744303 0.0037232723 0.0005943998 -0.0051356112 -0.0019934801 0.0024366863 0.0014824340 -0.0025406991 -0.0004290301 -0.0020181590 0.0427383602 0.0066354477 -0.0007333297 -0.0002378110 -0.0000599321 0.0088051412 -0.0067984515 -0.0122400543 -0.0032626880 0.0243713936 0.0165106861 -0.0087591675 -0.0071369671 -0.0010904719 -0.0015794246 -0.0011425332 0.0001598003 -0.0150048824 -0.0076752094 0.0070382418 0.0006043187 -0.0009999522 -0.0013363899 -0.0033562101 -0.0032379320 0.0031064409 0.0167574563 0.0004102523 -0.0093674238 0.0298043420 0.0204816211 -0.0064179348 0.2023776851 0.1171074173 -0.0415029361 0.0636220311 -0.0926930697 -0.1119581689 -0.0366986559 0.0892435145 0.0651957376 0.0164323720 0.0111152124 0.0084949650 -0.0056110566 0.0212457292 0.0007612476 -0.0048675307 -0.0156137483 0.0124927899 0.0525720874 0.0388221429 -0.0385093218 -0.0268926230 0.0463833936 0.0022676778 0.0320974405 -0.0354056005 -0.0044527314 -0.3445222042 -0.1398794913 -0.2881986355 0.1024042737 0.1907122723 0.1758814087 -0.2545585846 -0.3458070710 0.2507505614 0.0005388713 0.0026322585 0.0007760684 -0.0011766316 -0.0012062962 -0.0015801770 -0.0017571042 0.0016445832 0.0012833832 0.0031548453 0.0001784726 0.0014162135 -0.0002388868 -0.0018277879 -0.0020241038 -0.0031447798 0.0022257797 0.0010873512 0.0050897418 -0.0007883250 -0.0005321209 0.0072524347 -0.0059363322 -0.0047161631 -0.0019472373 0.0005317631 0.0002612113 0.0052644214 -0.0021900935 -0.0004436438 0.0079151786 -0.0080320361 -0.0059159513 -0.0007673946 -0.0003385108 0.0000910177 -0.0004235198 -0.0003565398 -0.0006105510 0.0024005756 0.0013451130 0.0012660995 -0.0009911755 -0.0001422686 0.0005604655 -0.0004083836 -0.0005582147 -0.0011146907 0.0045500595 -0.0000016519 -0.0005512623 -0.0027462977 0.0089004970 -0.0005825112 -0.0059300282 -0.0044918551 -0.0041310909 0.0047228051 0.0014899366 -0.0004036996 0.0024996017 0.0014246325 0.0026082247 0.0004961045 -0.0006191461 -0.0008576507 0.0005380297 0.0001725882 0.0004243226 0.0005868096 0.0030458978 0.0047565812 0.0035822188 0.0002850687 -0.0018662602 0.0016406687 -0.0036587480 0.0012664133 0.0015540666 0.0045453905 -0.0022328753 0.0078563779 -0.0012525936 -0.0007508266 -0.0041270725 -0.0004550565 0.0008589292 -0.0174397635 0.0005628944 0.0022356232 -0.0078260231 0.0047179774 -0.0005354770 0.0082755643 -0.0011023900 -0.0011264222 -0.0030761762 0.0020880171 -0.0002133715 -0.0192852952 0.0020996518 0.0038925976 -0.0106481438 -0.0073870454 0.0044999281 0.0029410752 0.0007594624 0.0043398201 -0.0037516626 -0.0003932943 -0.0051627407 0.0003010008 -0.0022409869 0.0021242745 -0.0025146058 0.0017599515 -0.0053068377 0.0010481462 -0.0021326159 0.0040546181 0.0010360418 -0.0118937107 0.0105650333 0.0023768793 -0.0010222582 0.0043572480 0.0019044640 0.0031976694 0.0004041597 -0.0082343241 -0.0057604708 -0.0072844107 -0.0080722461 -0.0172197972 0.0012374075 -0.0070600871 -0.0005960881 -0.0006045699 0.0465960101 -0.0169467146 0.0083139750 0.0115656444 0.0294102882 0.0205889322 0.0085891505 -0.0154695462 -0.0121246125 0.0027142164 0.0268689347 -0.0148922345 -0.0547279862 -0.3378418234 -0.1057000312 -0.1306948085 0.1718224686 0.0408689701 0.1053973821 -0.2265674018 0.2977716989 0.0011667313 0.0092169250 -0.0032367961 -0.0264921728 -0.0009440149 0.0036098001 0.0077828350 -0.0036368955 0.0003659017 0.0124956021 -0.0011842894 0.0009055013 -0.0155309921 -0.0056103835 0.0026792848 0.0076662996 -0.0018718654 0.0120747633 -0.0093349101 -0.0052228878 -0.0064059919 -0.0065042542 -0.0047222410 -0.0043293259 0.0035844175 0.0083651913 -0.0049304697 0.0188318601 0.0041474987 0.0207047501 -0.0011446462 0.0003675115 -0.0030594700 0.0041430316 0.0018004718 -0.0008524948 -0.0004908618 0.0009923003 -0.0003930210 0.0003447513 -0.0000934517 0.0002929371 0.0004783895 -0.0001772631 0.0005309424 0.0003960050 -0.0003340206 -0.0081488728 0.0047272567 0.0054344629 -0.0014242782 -0.0017522919 -0.0008105007 0.0008872934 0.0001489393 -0.0025511499 -0.0011941203 0.0002870869 -0.0004755411 -0.0004444314 0.0015358750 0.0008196620 -0.0006654251 0.0001930609 0.0005658732 0.0003455283 0.0005841878 -0.0016946053 0.0000038363 0.0002064426 0.0050169995 0.0016035426 -0.0021268851 0.0029587590 0.0000168954 0.0029943139 0.0052121242 0.0072324796 -0.0005795484 0.0010329323 0.0010906814 0.0011205573 -0.0012034145 0.0003339788 0.0013785155 -0.0008982121 -0.0049797870 -0.0045322355 -0.0021096392 0.0015361749 -0.0035126184 -0.0025711044 0.0010337965 -0.0001710338 0.0053427545 0.0012101570 0.0032764614 -0.0012391864 -0.0013407771 -0.0028860977 0.0046048185 0.0019771774 0.0032927114 -0.0055192800 -0.0017560891 0.0053821961 0.0029977197 -0.0057912997 0.0029849866 0.0051048842 -0.0024389471 0.0157285429 -0.0071381161 -0.0084592055 0.0047986263 0.0153168504 0.0000250366 0.0181204484 0.0105109135 -0.0063971637 -0.0006699645 0.0024771600 0.0004443213 0.0015827145 -0.0266066089 -0.0038727390 -0.0009419639 -0.0011944156 0.0036227513 0.0013059455 -0.0113847123 0.0037453474 -0.0061435770 -0.0230654726 -0.0107589083 0.0061062823 0.0085026019 0.0025212734 0.0021370916 0.0003540666 -0.0001886608 0.0113362946 0.0057958089 -0.0052358247 -0.0008058030 0.0014733086 0.0017334546 -0.0030101040 -0.0008164670 0.0004831165 0.0072376542 0.0116807792 0.0022339436 0.0216383747 0.0292597710 0.0065458766 -0.1563683704 -0.0864842890 0.0294907503 -0.0488848253 0.0717749482 0.0840808805 0.0254496177 -0.0661926151 -0.0491443478 -0.0173578520 -0.0111944221 -0.0086625265 0.0061439012 -0.0238965735 -0.0012481648 0.0068747623 0.0143628354 -0.0115077978 0.0126649398 0.0111238270 -0.0072826972 -0.0045092854 0.0037865988 0.0005806442 0.0135487493 -0.0054084812 0.0016545189 -0.2911372361 -0.1649246119 -0.3061870518 0.0430258612 0.0888014657 0.0721189626 -0.1512332624 -0.3842471512 0.1614486371 -0.0013677935 -0.0028824822 -0.0011745591 -0.0000164351 0.0013494041 0.0011040872 0.0016666687 -0.0007499693 -0.0002482082 -0.0003376845 -0.0015275343 -0.0020597522 -0.0008648970 0.0016113315 0.0013057435 0.0028293310 -0.0013390425 -0.0003653209 -0.0005789032 0.0005809342 0.0023407560 -0.0039899378 0.0041342734 0.0037232110 -0.0064942299 0.0021537920 0.0012508757 -0.0008446448 0.0018796232 0.0017670209 -0.0053838348 0.0060821563 0.0051570781 -0.0047183175 -0.0023635197 -0.0002460164 0.0030386848 0.0008583292 -0.0024425318 -0.0016132782 0.0000886340 0.0025185336 -0.0024132418 -0.0013286262 -0.0001410114 0.0015741985 0.0006426538 -0.0017424399 0.0125313947 0.0064633660 -0.0048135167 0.0099595821 -0.0066782191 0.0021307895 0.0071378222 0.0059039821 0.0056052693 0.0080420410 0.0032966762 -0.0028119865 0.0025201503 -0.0002677636 -0.0015856182 0.0016568575 -0.0023804832 -0.0032141407 0.0034234662 0.0009454889 0.0025339765 -0.0008796555 -0.0043580111 -0.0068491255 -0.0043759015 -0.0003289627 0.0022578805 -0.0084443875 0.0026397563 0.0000880092 0.0042605850 -0.0045099289 0.0009998164 -0.0045150395 0.0035994304 -0.0006670044 0.0071536851 -0.0023013114 -0.0003007865 0.0089720971 0.0034212302 -0.0026346579 0.0008593581 0.0120670678 -0.0047397443 -0.0082819324 0.0042395064 0.0000622308 -0.0021230237 -0.0059136825 0.0025381073 0.0269857577 0.0006233382 -0.0072224468 0.0188634182 0.0236223806 -0.0119199993 -0.0020737101 -0.0035584629 -0.0004920953 0.0046504468 0.0040259906 0.0030862328 0.0044662102 0.0040099490 0.0043063473 -0.0004240065 -0.0045220875 0.0028234417 -0.0108259337 -0.0033347159 -0.0166809814 -0.0058001930 0.0129113060 -0.0190919208 0.0033419275 0.0026587173 0.0029445404 -0.0030696888 -0.0008522655 -0.0040284257 -0.0067763412 -0.0010810983 -0.0092132543 -0.0019498188 0.0024522209 -0.0049916326 0.0144365992 -0.0099396182 -0.0053389678 -0.0481950626 0.1761737020 -0.1393697520 -0.0499745065 -0.1493402104 0.0755305187 -0.0943586068 0.1830957927 0.1514805535 -0.0062409623 -0.0244834910 0.0159677616 0.0552653193 0.3568800466 0.1107143909 0.1456120133 -0.1798014051 -0.0338182406 -0.1280860877 0.2383287522 -0.3044763439 0.0293404260 0.0932959397 -0.0351274227 -0.2657464034 -0.0182045185 0.0393289751 0.0735410353 -0.0427065970 0.0062063274 0.1152555194 -0.0249899478 0.0201224768 -0.1598271799 -0.0492826265 0.0241034118 0.0861740201 -0.0296150910 0.1434768639 -0.1083321090 -0.0500316757 -0.0886143665 -0.0788095490 -0.0480456993 -0.0602447100 0.0573248197 0.0993453562 -0.0392913363 0.2249311356 0.0598396185 0.2364859127 -0.0172196046 0.0079820373 -0.0385785584 0.0393880060 0.0132750670 -0.0109414752 -0.0030653473 0.0108484475 0.0024880972 0.0004800727 -0.0043869871 -0.0019139489 0.0017648669 -0.0041732358 -0.0008661398 0.0055764398 -0.0039216212 -0.0054554945 -0.0011109110 -0.0015891072 -0.0011560513 0.0005087640 -0.0009124102 -0.0005121368 0.0009211492 -0.0002715391 -0.0008041420 -0.0000891766 0.0017366860 0.0007218048 -0.0009381651 -0.0003440986 0.0004792837 -0.0000419074 0.0010053454 0.0002865849 0.0004467724 0.0005489834 -0.0001827771 0.0000124537 -0.0030522012 -0.0012559346 0.0024352843 -0.0020551928 -0.0010261894 -0.0006830657 -0.0057533922 -0.0036451775 -0.0008414853 0.0009184755 0.0009587661 -0.0009595495 -0.0003391116 0.0003381975 -0.0003106212 -0.0011064374 0.0001200355 0.0038077648 0.0015813387 -0.0014889122 0.0033969972 0.0018203907 -0.0011754198 -0.0005788843 -0.0031696993 -0.0002848220 -0.0022009401 0.0015765110 0.0010807743 0.0010972089 -0.0034426249 -0.0009570774 -0.0020320234 0.0035730714 0.0012926318 -0.0042410186 -0.0016386215 0.0026923294 -0.0022312879 -0.0035370319 0.0016645839 -0.0091997029 0.0027071526 0.0042332307 -0.0031634067 -0.0118454760 -0.0004433939 -0.0137210154 -0.0087449148 0.0046942841 -0.0003374047 -0.0006993775 -0.0002312783 0.0003079932 -0.0007442898 0.0044779480 -0.0158700613 -0.0122538184 0.0463100814 0.0001710434 0.0053476227 -0.0020119987 -0.0021687785 0.0046032959 0.0035238503 -0.0009762767 -0.0016114492 -0.0006261024 -0.0004554237 0.0001839499 0.0002144369 -0.0071060066 -0.0038265772 0.0043337569 -0.0008932647 0.0046567026 0.0013906722 0.0003296157 0.0000827069 0.0000906333 0.0004610405 -0.0034754546 -0.0021326870 -0.0036875296 -0.0075543965 -0.0030601105 0.0969870656 0.0524218399 -0.0163822743 0.0311837295 -0.0366235708 -0.0642501398 -0.0255657707 0.0365855895 0.0234553079 -0.0329718314 -0.0178485947 0.0135671366 0.0135607447 -0.0548336140 -0.0219014224 0.0341801260 0.0063548151 -0.0107512289 -0.0005519596 -0.0011053245 -0.0019402163 -0.0000461044 0.0002299403 0.0021056998 0.0013077464 0.0000683790 0.0003441253 0.0518889244 0.0378024949 0.0665429444 -0.0006769949 -0.0006547833 0.0003437920 0.0168430196 0.0851138592 -0.0212639685 -0.0122969867 -0.0271629619 -0.0081543319 -0.0073348857 0.0122215506 0.0058679673 0.0160856867 -0.0041756749 0.0013074284 -0.0119300365 -0.0113719026 -0.0182543232 -0.0063400587 0.0125772995 0.0096583982 0.0216196678 -0.0079549511 -0.0014305566 0.0147074768 0.0012044130 0.0295040968 -0.0224654938 0.0295337475 0.0293920991 -0.0015710010 -0.0006369215 -0.0022687545 0.0000646985 0.0114244225 0.0184087185 -0.0364187017 0.0393418308 0.0405200657 -0.0530160997 -0.0274946731 -0.0066155426 0.0279862110 0.0061030689 -0.0299614201 0.0090213188 0.0181770270 0.0487920471 -0.0351532289 -0.0169514763 -0.0016722044 0.0170484567 0.0038752213 -0.0274458895 0.1619579349 0.0613081097 -0.0576263322 0.0576024133 0.0248961664 -0.0035583152 -0.0118143540 -0.0025204245 -0.0023510114 0.1274541895 0.0472456645 -0.0402720257 0.0412016881 0.0018607109 -0.0100282377 -0.0009564121 0.0011030827 0.0014948214 0.0040257609 0.0010081005 0.0030575742 -0.0005686582 -0.0015650614 -0.0018184370 0.0081667406 0.0001121452 -0.0037047243 -0.1113323894 0.0253092130 0.0053350651 0.0669699273 -0.0434599803 0.0043882950 -0.0272594493 0.0432497935 -0.0122730058 0.0809079849 -0.0352046433 0.0000831241 0.0395751517 0.0494152826 -0.0251029376 -0.0238352735 0.1880478669 -0.0679780846 -0.0742621168 0.0528710544 -0.0046814920 -0.0441215999 -0.0704763334 0.0336030405 0.2727179467 0.0195794591 -0.0789793424 0.2073210893 0.2893071677 -0.1420763188 -0.0103226696 -0.0350684343 0.0119842158 0.0340063081 0.0396887217 0.0126347848 0.0538280129 0.0372971427 0.0600826562 -0.0167079460 -0.0472056216 0.0101540340 -0.1257692679 -0.0501520794 -0.1820690085 -0.0645037923 0.0974374479 -0.1778088655 0.0492084377 0.0255459624 0.0538713776 -0.0251811265 0.0084350004 -0.0450772855 -0.1198611234 -0.0411603870 -0.1443721475 -0.0615477321 -0.0542306871 -0.0524585884 -0.0052970584 0.0023277184 0.0004777422 0.0301889297 -0.0545243598 0.0407496230 0.0187719382 0.0481543775 -0.0035523217 0.0171383609 -0.0535104754 -0.0427666941 0.0015742174 0.0074602418 -0.0074445662 -0.0065081596 -0.1139031784 -0.0444805995 -0.0399475643 0.0728246461 0.0375708492 0.0298417630 -0.0897926126 0.1157050465 -0.1098132057 0.0405750886 -0.0071651418 -0.1215413864 0.0368233105 -0.0017286972 0.0676761848 0.0109923017 -0.0102865766 0.0954165554 0.0130203007 -0.0079984426 -0.0190216388 -0.0570391680 0.0222246932 -0.0383396738 -0.0543914675 -0.0093520559 -0.0406294152 0.0233846008 -0.0631893223 -0.0240878469 0.0147641920 -0.0432962998 0.0840527752 0.0361208108 0.0775104989 0.0502490026 0.0495283945 0.0174947125 0.0086452544 0.0057605197 0.0062232531 0.0068800082 0.0119827495 -0.0037863252 0.0015161385 0.0016754093 0.0002930515 -0.0016654367 -0.0013793084 0.0009670155 -0.0010193443 0.0001992645 -0.0021282552 0.0013407144 -0.0018378291 -0.0027862854 -0.0076725937 -0.0049603139 0.0017256159 0.0021792991 0.0024284355 -0.0003676224 0.0007082184 0.0029726915 0.0007067706 -0.0012475801 -0.0003903649 0.0006502854 0.0001562397 -0.0013241052 -0.0006362519 -0.0010419944 -0.0011764754 0.0002358181 0.0000909163 -0.0012110003 -0.0008335081 -0.0014137369 -0.0019390753 0.0004437072 -0.0044296872 0.0001753255 0.0038818548 -0.0012632794 0.0008586544 0.0014231185 0.0003274603 -0.0010107264 -0.0006678520 -0.0002104074 0.0004374520 0.0004937126 -0.0000416509 0.0003874494 -0.0007917875 -0.0013983744 -0.0011745684 0.0004651394 -0.0011760046 -0.0007390160 0.0003944602 -0.0001042392 0.0014268697 0.0002415781 0.0010370461 -0.0007210977 -0.0005630972 -0.0006950873 0.0015623272 0.0005068830 0.0008531484 -0.0014176592 -0.0005675145 0.0029436855 -0.0002151600 -0.0012914427 0.0013763220 0.0030589639 -0.0000479061 0.0041658215 -0.0012853841 -0.0017277475 0.0013162498 0.0041521825 0.0000780686 0.0055345846 0.0033688316 -0.0018888628 0.0008046314 -0.0002623546 0.0000097380 -0.0027093703 0.0100671893 0.0018964180 0.0016552983 -0.0011095659 -0.0203950385 -0.0005042884 0.0002475538 0.0000159490 -0.0010675311 -0.0016849097 -0.0005635645 0.0007515987 0.0007029441 0.0001279396 0.0000308018 0.0000884958 -0.0000282012 -0.0004635623 -0.0005015969 0.0003344226 -0.0007038114 0.0020313976 0.0004843977 -0.0001403807 0.0000574481 0.0000713945 0.0001293330 0.0000536546 -0.0000239636 -0.0000259425 -0.0005208386 -0.0002621406 0.0052467246 0.0050695356 -0.0024554802 0.0016899519 -0.0015722887 -0.0043785465 -0.0021676329 0.0031681907 0.0020218888 -0.0126022410 -0.0063543039 0.0067402347 0.0051150297 -0.0228503218 -0.0097536428 0.0165745659 0.0018091838 -0.0044933392 -0.0001608227 -0.0002398833 -0.0009703289 0.0002241723 -0.0007823891 0.0008257596 0.0014122427 0.0001028088 0.0004197860 -0.0003812682 0.0016663983 0.0024287885 0.0005760523 0.0027694230 0.0009508776 -0.0007646767 0.0024888703 0.0003630188 0.0060165939 -0.0005058411 0.0072175617 0.0445528613 0.0005247258 0.0234520515 0.0026154501 -0.0246195613 -0.0284800287 -0.0374624040 0.0144099692 0.0028245618 0.0257515694 0.0132452990 0.0263744039 0.0211687765 -0.0333236434 -0.0247844185 -0.1752088714 0.0180234670 -0.0689422015 -0.1049073910 0.0667603160 0.0342125044 0.0052536296 -0.0012903235 -0.0002497431 -0.1252969407 0.0222363406 -0.0310814196 -0.1011677022 0.0899623769 0.0420873713 -0.0311663683 -0.0105756380 0.0245083636 -0.0083925237 -0.0126960050 -0.0312538812 0.0421472748 0.0174731911 -0.0046065000 -0.0185470583 0.0013481474 0.0354938612 -0.0289787089 -0.0260427734 -0.0386560257 0.0978784711 0.0560110155 -0.0039102130 0.0831580127 0.0638486125 0.0939705209 -0.0149956319 -0.0094775471 -0.0066799993 0.0967135639 0.0525084576 0.0147544060 0.0924218249 0.0846146502 0.1298288704 0.0007933482 -0.0011835504 -0.0014843076 0.0011518355 0.0002108703 0.0008015040 0.0012649535 0.0047800512 0.0074268207 0.0033417062 0.0000051474 -0.0020168895 0.0973457702 0.0336320746 -0.0279137608 -0.1160616149 -0.0143270164 0.0240651147 -0.0687601831 -0.0428572694 0.0273833720 -0.0464816112 0.0689763377 -0.0186615061 0.1895483568 -0.0765268216 0.0015806237 0.1531301406 -0.3127023886 0.0944821958 -0.0221113120 -0.0402458286 0.0185735913 0.0861659819 0.0342150839 -0.0278859785 -0.0298831923 -0.0499732121 0.0290536546 -0.0728171827 -0.2132497463 0.0913429030 0.0853166098 0.0311869869 0.1080592756 -0.0795547240 -0.0083663114 -0.1115401639 -0.0053871153 -0.0506304783 0.0312716492 -0.0522979675 0.0276314130 -0.1038128445 0.0259169478 -0.0456846975 0.0880140450 0.0208864763 -0.2546658569 0.2246782363 0.0302444957 -0.0393113015 0.0766595755 0.0586624936 0.0934778410 0.0163878031 -0.1485254875 -0.1256150614 -0.1184111149 -0.1769287379 -0.3913300656 0.0381128852 0.0001241604 -0.0000889708 -0.0004203139 0.0039080261 0.0012091919 -0.0014605190 0.0005772847 -0.0010608348 0.0066611266 -0.0051093258 0.0020923997 0.0021613486 0.0000103681 -0.0013536486 -0.0005884058 0.0083388147 0.0161118287 0.0003249813 0.0101692693 0.0003066958 0.0128178303 -0.0136679664 0.0039801909 -0.0040677879 0.0080677486 0.0022216499 -0.0012895860 -0.0014144016 -0.0041068608 0.0020875639 -0.0016614447 -0.0033022813 0.0012500780 -0.0035549277 -0.0063022360 0.0037728725 -0.0041369065 0.0020560444 -0.0004863026 -0.0030023459 -0.0015146298 -0.0029492199 0.0011202963 0.0055704882 -0.0036096673 0.0011739024 0.0029548745 -0.0010573123 0.0024006028 -0.0017623277 0.0055222923 -0.0029459205 0.0020171111 -0.0056394280 0.0002103653 0.0004897092 0.0003614878 0.0005786343 -0.0007548575 -0.0006413865 0.0005327874 -0.0007744077 0.0031133466 0.0007758241 0.0006679469 -0.0016579665 -0.0026068472 -0.0003571024 -0.0040720987 -0.1763537325 0.1175058995 0.1997176809 -0.0589788857 -0.0305359023 0.0235155456 0.0089169209 0.0239280470 0.0030762912 -0.0144764340 0.0272424079 0.0220831312 -0.0049631506 -0.0063048260 0.0011784703 0.0163868241 -0.0213550476 -0.0179012225 -0.0075898629 0.0041459140 0.0063326222 -0.0147817549 -0.0271468065 -0.0046609763 -0.0084093618 -0.0269577205 -0.0061904867 -0.0649774122 0.0095324551 0.0429396390 -0.0100570684 0.0078445545 0.0088609432 0.0267635092 -0.0379305487 -0.0350741670 0.0337528208 0.0273908004 -0.0116547894 -0.0673757295 0.1097276739 0.0587732363 -0.1335879001 -0.0687306821 0.0499854379 -0.1170352209 -0.0581835383 0.0418358888 0.0103381319 0.1095235350 0.0110943200 0.0771805300 -0.0675535333 -0.0440349538 -0.0287398446 0.1204315066 0.0293525265 0.0671983084 -0.1245225052 -0.0468576638 0.1901712622 0.0211628369 -0.0767023318 0.1045945858 0.2407062410 -0.0027381239 0.3067342320 -0.0742369272 -0.1425498156 0.1062387014 0.3894146221 0.0143433690 0.4598384575 0.2984666918 -0.1530435852 0.0114140059 0.0046301628 -0.0002725663 -0.0056565396 0.1544656976 0.0302201388 0.0004126209 0.0003258135 -0.0019952772 -0.0038125798 -0.0073066560 0.0002945117 0.0107233088 0.0133364624 0.0043555534 -0.0058497682 -0.0049235073 -0.0011244846 -0.0004672556 -0.0002856142 0.0001226200 -0.0002831768 0.0000971098 0.0006683130 0.0022394403 0.0006181050 0.0003744329 0.0006495535 0.0000329640 0.0002648508 -0.0023521724 -0.0015369280 0.0016055637 0.0008908241 -0.0025837511 0.0022114751 0.0108351212 0.0021160551 0.0007569080 0.0047713448 -0.0049942041 -0.0077881731 -0.0041433714 0.0017961579 -0.0000125262 -0.0119972416 -0.0109515887 -0.0155390264 0.0032692441 0.0005048697 0.0104645328 -0.0216849929 0.0073243486 0.0001394840 0.0020630422 0.0013784351 -0.0001947444 -0.0015571542 0.0045349090 -0.0014902270 -0.0028238576 -0.0025282587 -0.0016568845 -0.0102961386 0.0210092051 0.0266429805 -0.0175815073 0.0084855024 -0.0451155949 0.0327377198 0.0063667768 -0.0277634315 -0.0003519134 -0.0018305136 -0.0010718157 -0.0029417581 0.0003494050 -0.0013913266 -0.0007550656 0.0030374219 0.0032973212 0.0098023212 -0.0045669563 -0.0021730254 -0.0041012332 -0.0004486319 -0.0023249854 -0.0004707032 0.0025441170 0.0021617717 0.0095774739 -0.0013958701 0.0043725125 0.0085208580 -0.0049018648 -0.0025069261 -0.0301097485 0.0088186624 0.0055906683 0.0130811571 -0.0011873083 0.0046164317 0.0067447448 -0.0053408900 -0.0010370452 0.0002083857 0.0003303368 0.0012360319 -0.0011866121 -0.0007746285 -0.0005388439 0.0014169107 0.0001460650 -0.0016220021 0.0001396482 0.0005856152 0.0016766248 -0.0018470395 -0.0013753108 -0.0012051875 -0.0001874591 0.0010250787 0.0013576753 0.0020379473 0.0026768002 0.0043837544 0.0011021094 -0.0000305984 -0.0003929114 0.0011860669 0.0005467062 0.0019418394 0.0033329234 0.0036046293 0.0063437335 0.0073708435 -0.0102447773 -0.0142343127 0.0136421441 0.0040295341 0.0102838023 -0.0000479067 0.0000100009 -0.0000504375 -0.0010443470 0.0000489580 0.0005481626 -0.0113770138 0.0004015114 0.0015089171 0.0096469689 -0.0002725130 -0.0016966630 0.0060261032 0.0036058155 -0.0023382460 0.0048224855 -0.0062324700 0.0015822560 -0.0185925889 0.0068304333 0.0001459854 -0.0132537345 0.0285057532 -0.0086633422 0.0026430684 0.0039039730 -0.0018993823 -0.0086315450 -0.0036567317 0.0028697584 0.0016956850 0.0049451374 -0.0025279267 0.0073386274 0.0210762627 -0.0090069300 0.0038729055 0.0019924256 0.0048375642 -0.0058794546 -0.0030450364 -0.0060027525 0.0004125934 -0.0024206092 0.0025482150 -0.0031184770 0.0016005013 -0.0061646794 0.0005539168 -0.0028207079 0.0035090675 0.0007466101 -0.0137159058 0.0117356897 0.0018831694 -0.0015892043 0.0040532324 0.0030493755 0.0046655616 0.0009905650 -0.0089463832 -0.0066067051 -0.0076705000 -0.0090035511 -0.0200035433 0.0021191928 -0.0002701822 0.0049576762 0.0019265486 -0.0057327790 -0.0365997658 0.0339124847 0.0056329072 0.0238878032 -0.0339487480 0.0276263473 -0.0422958928 -0.0367273961 0.0017091816 0.0013963223 -0.0001740728 -0.0113562661 -0.0115792470 0.0040788262 -0.0102492439 0.0028114035 -0.0117563583 0.0005636307 -0.0011459705 0.0036864138 0.0958028980 0.0491141125 -0.0235573076 -0.0764828014 -0.0542328797 0.0301144907 0.0040397490 -0.0497868663 0.0159559421 -0.0279885939 -0.1021144595 0.0522298462 -0.1034675711 0.0071213976 0.0043568026 -0.0998937413 -0.0104463969 -0.1345059026 0.0567042049 0.1159389051 -0.0209125671 0.0572141885 0.0638616987 0.0192552170 0.0080101104 -0.0696749814 0.0937590618 -0.1446881229 -0.0016225005 -0.1877856943 0.0280484612 -0.0065065983 0.0408691593 0.0316410257 0.0082387559 -0.0027412157 0.0060279033 -0.0013904597 0.0020519023 -0.0072153520 -0.0026749571 0.0039035402 -0.0042478238 0.0034122414 -0.0076446187 0.0200560857 -0.0134716953 -0.0237817460 0.0021659778 -0.0035975141 -0.0021400087 0.0009785451 -0.0035131020 -0.0018850137 0.0058010901 -0.0030008108 -0.0053914005 0.0004170960 0.0059560354 0.0014749791 -0.0039376555 0.0007772088 0.0026927452 0.0003280925 0.0027829287 0.0009143449 -0.0016338132 -0.0011055833 0.0016612463 0.0029202744 -0.0107924223 -0.0018694752 0.0110063021 -0.0057032662 -0.0083349929 0.0010562765 -0.0133789147 -0.0053265133 -0.0014173291 0.0032944432 0.0021772334 -0.0076681017 -0.0005791050 0.0047853007 0.0155163765 -0.0187437342 -0.0141161336 0.0144215180 0.0067231916 -0.0054175041 0.0124611535 0.0071196151 -0.0043173166 0.0003144557 -0.0113987940 -0.0017682161 -0.0082664601 0.0056802990 0.0044358719 0.0032047190 -0.0120117768 -0.0030524709 -0.0078225190 0.0109156718 0.0049215889 -0.0234718664 0.0011987977 0.0100273376 -0.0107622727 -0.0202540477 0.0016187302 -0.0329163801 0.0091566527 0.0152457733 -0.0116182386 -0.0340536550 -0.0002320999 -0.0476153788 -0.0298067169 0.0160022530 0.0005156059 0.0010183856 -0.0003499366 -0.0066793178 -0.0300614717 0.0077650700 0.0100911218 0.0100559489 -0.0472192695 -0.0001059695 -0.0010757976 -0.0001302385 -0.0020752505 -0.0035640386 -0.0013885614 0.0020039825 0.0017253892 0.0004153605 -0.0001215110 0.0000751782 -0.0004119830 0.0004921520 -0.0019516188 -0.0000266404 -0.0021863211 0.0027195621 0.0008665464 -0.0001684174 0.0001832142 0.0002051114 -0.0002583840 0.0005554265 0.0003560233 -0.0003035029 -0.0008220138 -0.0007550894 -0.0058415381 0.0136723988 -0.0110700233 -0.0027629934 0.0018470620 0.0047487858 0.0008071221 0.0090806076 0.0079355113 -0.0114281644 -0.0032213674 0.0165629772 0.0055703233 -0.0315705703 -0.0205485924 0.0351355110 -0.0030702465 -0.0051744303 -0.0012648265 -0.0013478566 -0.0017211897 0.0008882549 -0.0022066271 0.0016416844 0.0023151184 0.0007921175 0.0010171266 0.0038960218 0.0013116977 0.0031724180 0.0018301814 0.0001236840 0.0042371747 -0.0024032484 0.0059368831 0.0011805076 -0.0076854615 -0.0209146311 -0.0082412249 -0.0352546470 0.0064171130 -0.0146716912 0.0056956205 0.0166175276 0.0217082746 0.0194191930 -0.0178268715 -0.0137553665 -0.0219686940 -0.0012241691 -0.0123657950 -0.0017393909 0.0191202615 0.0167011083 0.1306345301 -0.0179350461 0.0700354281 0.0634536242 -0.0328958439 -0.0084788710 -0.0035280975 0.0001335172 -0.0014589479 0.0864034013 -0.0085262723 0.0330617836 0.0484277638 -0.0399768292 -0.0035535192 0.0217750658 0.0135310534 0.0169520448 -0.0229825065 -0.0096247497 0.0083691108 0.0190873892 -0.0034206269 -0.0415517088 0.0132478504 0.0123533693 0.0225739529 -0.0282861863 -0.0180023184 -0.0021584091 -0.0669908546 -0.0125983034 0.0378589067 -0.0013484780 0.0157731201 0.0491412792 -0.0044365737 -0.0066593869 -0.0050378171 -0.0349256564 -0.0024842628 0.0375709154 0.0209369521 0.0495976692 0.0792984298 -0.0014480188 0.0019852699 0.0025811875 0.0011710618 0.0003228858 0.0008922939 0.0017107184 0.0061932878 0.0093474520 -0.0013717176 -0.0000205530 0.0001912240 -0.1567739439 0.0200852804 0.0153411199 0.1260946564 -0.0140841915 -0.0174390858 0.0653548120 0.0478947057 -0.0287010929 0.0705160628 -0.0831198443 0.0200702861 -0.2222477454 0.0875018951 -0.0007339623 -0.1604232463 0.3626821863 -0.1120375064 0.0297334382 0.0511213429 -0.0243926733 -0.1106652757 -0.0471619826 0.0369524303 0.0196612594 0.0655918515 -0.0310749599 0.0989913045 0.2765912858 -0.1192464825 0.0689840163 0.0497019657 0.0724756991 -0.1043349358 -0.0657766182 -0.0953459712 -0.0158469360 -0.0530607054 0.0158717172 -0.0415309372 0.0441854757 -0.0997024463 0.0544930797 -0.0292159736 0.1180066022 0.0375180464 -0.2480730546 0.2481273775 0.0048135400 -0.0351760401 0.0347093297 0.0578866121 0.0671996909 0.0357454682 -0.0804700950 -0.0809933838 -0.0525859232 -0.1065644913 -0.2767581451 0.0555179522 0.0011196790 -0.0004208510 -0.0007766767 0.0009535337 0.0128995336 -0.0105496839 -0.0034593117 -0.0125670545 0.0126238703 -0.0123248998 0.0142169775 0.0120417831 -0.0015873357 -0.0020739105 0.0006207788 0.0166410113 0.0381928778 0.0029511819 0.0275894325 -0.0174120784 0.0127930980 -0.0177239000 0.0183261509 -0.0224156389 -0.0005000146 0.0009108850 -0.0002552446 -0.0036167292 0.0003507050 0.0004872647 0.0016198775 -0.0001864074 -0.0001190179 0.0014151203 -0.0004585768 0.0003803168 -0.0023955997 -0.0009137944 0.0004774236 0.0006385169 -0.0006133097 0.0014971657 -0.0015197229 -0.0004122509 -0.0015784916 -0.0005537738 0.0000289920 -0.0007678623 0.0018500923 0.0015490443 0.0008898282 0.0015720536 0.0009039524 0.0010892254 -0.0002989054 0.0002048341 -0.0005503064 0.0008278984 0.0003795810 -0.0004414503 -0.0001744049 -0.0002179950 0.0011588688 0.0001753227 0.0003888033 -0.0001634103 -0.0004955888 0.0005327650 -0.0011574279 -0.0150741243 0.0043421697 0.0176951078 -0.0381548899 -0.0240519107 0.0135456331 0.0095719212 0.0145469055 -0.0007543407 0.0059589262 0.0142975301 0.0026640209 -0.0067513253 -0.0022753271 0.0030714336 0.0058656115 -0.0111212743 -0.0075964473 -0.0071148000 0.0012414226 0.0049052645 -0.0011884492 -0.0150428419 -0.0032138227 -0.0076929811 -0.0116411891 0.0022913861 -0.0349703735 0.0039892475 0.0214161584 -0.0086039332 -0.0041508507 0.0030822374 0.0031328305 -0.0088251938 -0.0055497980 -0.0072163640 0.0080854814 0.0025152986 0.0328849582 -0.0213683892 -0.0165336074 0.0051497173 0.0023256891 -0.0008797389 0.0032544346 0.0037416096 -0.0008426656 0.0031937382 -0.0049244871 -0.0021644494 -0.0040133166 -0.0000546776 0.0016105346 0.0037708300 -0.0046500170 -0.0023498046 -0.0040921094 0.0019182653 0.0019509698 -0.0160521167 0.0070238234 0.0079733892 -0.0039613631 -0.0001695990 0.0033458332 -0.0180505037 0.0090754957 0.0091462887 -0.0051984191 -0.0026513704 0.0018464292 -0.0170992301 -0.0083067732 0.0061938562 0.0009675115 0.0061176750 0.0010216567 -0.0013194135 -0.0167293414 0.0004203531 -0.0012685263 -0.0011827753 -0.0013595909 0.0133694464 -0.0152007673 0.0076759069 0.0249674979 0.0334783318 0.0097648340 -0.0168162785 -0.0149118890 -0.0032472104 -0.0016277598 0.0011635948 0.0022991974 -0.0114675300 -0.0028457715 0.0080878621 0.0016181424 0.0011556013 0.0010923826 0.0013311512 -0.0004832958 0.0001142571 -0.0050546123 -0.0004369475 0.0024045893 -0.0002899099 0.0049999582 0.0030567047 0.1912071032 0.0633737748 -0.0031050494 0.0608456664 -0.0638355611 -0.1225534346 -0.0524228298 0.0433417927 0.0207568959 -0.0171044705 -0.0114027625 0.0030303564 0.0057603549 -0.0181229526 -0.0142951449 0.0116854596 0.0143660076 -0.0138573082 0.0079560871 0.0042388399 -0.0069934859 -0.0058016290 0.0128163910 0.0033954854 0.0019141769 -0.0076142280 -0.0030522972 0.0199644679 -0.0113595520 -0.0142623851 -0.0134644167 -0.0466296141 -0.0268866545 0.0251314573 -0.0154664828 -0.0191016214 -0.0004128960 -0.0001563152 -0.0001231605 0.0001925131 0.0002614140 0.0004183716 0.0004631204 -0.0004121016 -0.0002463793 -0.0006459704 0.0000519321 -0.0002154709 -0.0001750049 0.0004156515 0.0003609471 0.0008630044 -0.0007088896 -0.0003642589 -0.0000652562 0.0006635879 -0.0000390787 -0.0018652682 0.0020800343 0.0010356473 0.0004203758 -0.0002215467 -0.0002956143 -0.0009402791 0.0003863633 0.0002527300 -0.0017842672 0.0018116036 0.0012600028 0.0003333563 0.0002028819 -0.0000579791 0.0003047662 0.0005017200 0.0013557164 -0.0026546921 -0.0018867293 -0.0023330808 0.0022631403 0.0010678482 -0.0000659014 -0.0006779029 -0.0000577923 0.0009065330 -0.0008287876 -0.0015346305 0.0003152789 0.0000590476 0.0002077872 0.0011404094 0.0069398110 0.0052913551 0.0051049695 -0.0053645093 -0.0018784694 0.0017643742 -0.0020357182 -0.0012349065 -0.0004757255 -0.0001212595 0.0001986407 0.0002858173 -0.0000524213 -0.0000193374 -0.0000267158 -0.0007683127 -0.0034170866 -0.0053961752 -0.0042571175 -0.0002526881 0.0018318502 -0.0008768332 0.0004112124 -0.0000386235 0.0007041187 -0.0004642888 0.0000353261 -0.0006205925 0.0001697353 0.0000369601 0.0006339224 0.0002516730 -0.0001956451 0.0015108832 0.0000937743 -0.0001162258 0.0007226415 0.0004498816 -0.0001494937 -0.0007715013 0.0005760617 -0.0000663397 -0.0003900217 -0.0009718090 0.0004314537 0.0026370032 0.0002966530 -0.0006563241 0.0021806629 0.0026441168 -0.0012575004 0.0008753942 0.0000023656 0.0013748998 -0.0008066020 0.0001393404 -0.0013119439 0.0001429626 -0.0002757344 0.0004567077 -0.0005734328 -0.0000668309 -0.0008488894 -0.0000216888 -0.0004051629 0.0004628614 -0.0001162491 -0.0021080398 0.0014426636 0.0003023125 -0.0005250659 0.0008634141 0.0007063835 0.0012923402 0.0000746370 -0.0016805460 -0.0014921181 -0.0013433095 -0.0020667811 -0.0043946716 0.0002846698 0.0053021038 -0.0009018247 0.0046303184 -0.1038508933 0.0427184096 -0.0217765053 -0.0324871130 -0.0451553635 -0.0961398884 0.0534986100 0.0322350635 0.0177182754 -0.0011405585 0.0207464470 0.0469857321 -0.2873856979 -0.1912768300 0.1464716418 -0.2233454939 -0.2843926805 -0.6068779992 0.3596558531 0.1880460041 -0.2730120059 0.0017015084 -0.0025464204 0.0009316437 0.0062482201 -0.0001583279 -0.0004343500 -0.0020450774 0.0005629095 0.0000206174 -0.0027847081 0.0016001622 -0.0005662744 0.0045496081 0.0016742989 -0.0007774745 0.0022018332 -0.0000744856 0.0037160068 -0.0002388910 -0.0016454954 0.0005256971 -0.0014121788 -0.0008499794 -0.0012963820 -0.0003843221 0.0004627921 -0.0008292036 0.0022455113 0.0007297685 0.0030198552 -0.0018830593 0.0012141002 -0.0024963334 -0.0016839494 -0.0007778908 -0.0001807971 -0.0008595829 -0.0032467781 0.0058551181 0.0037113935 0.0028390449 -0.0037678818 -0.0039250747 0.0062399357 -0.0069352343 0.0214141662 -0.0645176592 -0.0517801913 -0.4273706436 -0.2877848630 0.1506064800 0.1089047915 0.1518163673 -0.0133144917 0.0798394312 0.1274141091 -0.0066677912 -0.0831843219 -0.0076805095 0.0468025602 0.0621934766 -0.1263706017 -0.0839756858 -0.0816626806 0.0343104995 0.0644255216 0.0109268691 -0.1655939466 -0.0528811515 -0.0954255916 -0.1270186955 0.0293704886 -0.3661055588 0.0266966688 0.2317021619 -0.0961437801 -0.1225538433 0.0194064790 0.0011845939 -0.0474196551 -0.0212725903 -0.0414208410 0.0341698057 0.0344485701 0.1437381587 -0.1019046210 -0.1173196766 0.0175509850 0.0088860900 -0.0035567380 0.0144404895 0.0215361955 -0.0029527486 0.0207593286 -0.0185287636 -0.0118228572 -0.0171842624 -0.0092409652 0.0056141841 0.0181204628 -0.0161129552 -0.0101463995 -0.0200714669 -0.0042829315 0.0078513301 -0.0800926180 0.0452321009 0.0413595818 -0.0173495400 0.0459909536 0.0200169525 -0.0846838621 0.0496423041 0.0427621505 -0.0233577998 0.0216801554 0.0131006507 -0.0687619169 -0.0258205593 0.0250860756 0.0035097509 0.0698523620 0.0147875172 -0.0117568334 -0.3184349116 -0.0423249708 0.0015934897 0.0008102936 0.0004721001 -0.0145679113 -0.0039927160 0.0013145430 0.0608328732 0.0142545154 -0.0165965273 -0.0211269069 -0.0145185210 -0.0011782034 -0.0017310971 -0.0018991297 0.0001970562 0.0038273659 0.0016417325 -0.0017321473 0.0018431965 0.0011522761 -0.0024793239 0.0010957457 0.0013517777 0.0000042258 -0.0215847634 0.0100595645 0.0161612006 -0.0023439815 0.0139844991 0.0088941453 -0.0383232736 -0.0135739755 0.0010480539 -0.0071750800 0.0048062318 0.0244954073 0.0057698170 -0.0049196671 -0.0050267248 0.0078555984 0.0063065210 0.0060571909 -0.0016389071 0.0161450579 0.0030895767 -0.0101727446 -0.0170409520 0.0146998596 0.0015904886 0.0001213358 -0.0060967932 -0.0014061689 0.0048108305 0.0085147657 0.0055232554 -0.0064705529 -0.0024157505 0.0404478529 -0.0532618324 -0.0691741281 -0.0372360680 -0.1274600225 -0.0648070318 0.0581875161 -0.0742390444 -0.0434407391 -0.0015858081 0.0013096763 -0.0002698611 -0.0015753429 0.0004454182 0.0004665630 0.0008343287 -0.0001317060 0.0006607037 0.0014510326 -0.0003117072 0.0000433831 -0.0048298373 0.0010416543 -0.0011130092 0.0041301204 -0.0027888278 -0.0011856128 0.0190622003 0.0056503650 0.0018690067 -0.0043747894 0.0097699390 0.0024891032 -0.0030113510 -0.0000837411 -0.0011978012 0.0041356972 0.0005336172 0.0030370667 -0.0022345730 0.0037062895 0.0030460190 -0.0010803449 -0.0002498688 0.0011412446 -0.0009516889 -0.0010681808 -0.0023097949 0.0031606055 0.0016336597 0.0010940574 -0.0015170023 -0.0003572344 0.0011375926 -0.0005218858 -0.0006892516 -0.0012951759 0.0039603443 0.0028316432 0.0000454847 0.0038254398 0.0028280845 0.0041849005 -0.0048887626 -0.0029293542 -0.0025814645 0.0028177608 0.0007941793 0.0002423807 0.0028042739 0.0020497299 0.0030674184 0.0006151296 -0.0003826453 -0.0004829814 0.0019233011 0.0004873703 0.0014745926 0.0006276824 0.0017341690 0.0030133122 0.0027294989 0.0002423336 -0.0011807776 0.0003104481 -0.0008341526 0.0002678719 -0.0002357515 0.0007510825 -0.0002631278 0.0013367794 -0.0000104666 -0.0002162292 -0.0007409069 -0.0003488927 0.0002551061 -0.0024264398 0.0002951941 0.0002209617 -0.0014850860 0.0007395318 -0.0000642167 0.0012329990 -0.0004640617 -0.0000568991 -0.0000858093 0.0008409615 -0.0003043035 -0.0035029581 -0.0000173975 0.0008550884 -0.0022708309 -0.0021319579 0.0011425849 -0.0015003406 -0.0010971323 -0.0014508893 0.0018849929 0.0012447971 0.0016931273 0.0002328123 0.0009444240 -0.0004240798 0.0007404800 -0.0008731711 0.0018316742 -0.0003669384 0.0009930620 -0.0011056847 -0.0006585095 0.0041331883 -0.0040493894 0.0000896438 0.0006013680 -0.0003648183 -0.0009471489 -0.0009051640 -0.0007564460 0.0007042779 0.0011228609 0.0003857905 0.0013171733 0.0040259050 -0.0010272782 0.0052927055 0.0021222920 -0.0034181520 -0.0067836916 -0.0063912243 0.0039860007 0.0001851804 -0.0166645403 0.0162574546 -0.0251081159 -0.0003344972 0.0005858444 0.0033789583 -0.0047308969 -0.0133522093 0.0856843783 0.0553058239 -0.0408964749 0.0701591443 0.0842054050 0.1772468510 -0.1199811071 -0.0513921238 0.0829251221 0.0012404073 -0.0017206593 0.0005915772 0.0066529387 -0.0004546078 -0.0005455181 -0.0027291285 0.0003966084 0.0001888372 -0.0020639110 0.0017086121 -0.0007459650 0.0049014846 0.0014449592 -0.0008606198 0.0009792613 0.0000442535 0.0014065081 -0.0000257027 -0.0011519586 0.0005476622 -0.0005857468 -0.0003439890 -0.0004255632 0.0000207696 0.0002926297 -0.0002589343 0.0010333665 -0.0000861779 0.0007449649 -0.0009258451 0.0005733395 -0.0007014333 -0.0019822811 -0.0005736918 0.0006697652 0.0004303602 -0.0005792356 -0.0002609529 -0.0000481358 0.0007014753 0.0006350231 -0.0004293436 0.0011732882 0.0001341077 -0.0009369841 -0.0120258497 -0.0126692131 -0.0812935641 -0.0520544181 0.0294276405 0.0208459003 0.0310478101 -0.0018200521 0.0150705858 0.0247521667 -0.0009953967 -0.0163420502 -0.0054129756 0.0078163105 0.0129937056 -0.0239810061 -0.0166769860 -0.0160874354 0.0056497763 0.0120027801 0.0036197288 -0.0313913392 -0.0102207347 -0.0193770759 -0.0150228970 0.0090649658 -0.0734105766 0.0073624663 0.0465087441 -0.0171345705 -0.0180177277 0.0099102123 -0.0001865576 -0.0112173640 -0.0032728833 -0.0099809669 0.0124454265 0.0060385454 0.0492148555 -0.0329377739 -0.0180256518 -0.0001126273 -0.0008381577 0.0005651982 -0.0009147223 0.0033353844 0.0004870538 0.0051244798 0.0009217774 -0.0025243270 -0.0011379002 -0.0071477178 -0.0000466373 0.0037001213 0.0018603266 -0.0013633840 -0.0020160867 -0.0076612249 -0.0008335681 -0.0111797412 0.0115645068 0.0128512109 -0.0030017096 0.0282429491 0.0014461589 -0.0125624341 0.0134648569 0.0068251267 -0.0004182552 0.0219782430 0.0054155975 0.0022855278 0.0056278020 0.0024943257 -0.0002899663 0.0150388853 0.0034440547 -0.0009465940 -0.0825206467 -0.0138569033 0.0001432136 -0.0000296388 0.0001960475 0.0500898000 -0.0589017936 -0.0505905503 -0.2287173208 -0.0098240272 0.0896981513 0.0893269320 0.0574593186 0.0036728317 0.0007956558 0.0013355580 0.0001576777 -0.0012087267 -0.0010946746 -0.0009389354 -0.0035302198 0.0000900394 0.0007047178 -0.0021432996 -0.0017296963 -0.0018570769 0.0737909777 -0.0410836991 -0.0582437986 0.0089793970 -0.0665993891 -0.0446620702 -0.0215348795 -0.0121353845 0.0041845307 -0.0167397068 0.0269162187 0.0095628496 0.0078632833 -0.0148665692 -0.0061834652 -0.0148208237 -0.0083739276 -0.0073548986 0.0056148612 -0.0276100318 0.0169246401 0.0051008269 0.0112328426 -0.0111918282 -0.0188146863 -0.0091884807 0.0281302614 0.0107556168 -0.0248665278 -0.0239386995 -0.0242042303 0.0198027486 0.0037382294 -0.0839805697 0.2471824686 0.3428048003 0.1540410174 0.4570983919 0.2573937462 -0.2228452137 0.3958856495 0.1560057750 -0.0000492918 0.0001199234 -0.0005131849 -0.0003537280 -0.0000746457 -0.0000530805 -0.0003666287 0.0003260392 0.0003377242 0.0020691912 -0.0006069332 0.0000048513 -0.0018589631 0.0001551365 -0.0005746204 0.0006991575 -0.0001187911 0.0003323867 0.0054776835 0.0011711794 0.0006205837 0.0002094730 0.0013953417 -0.0004023356 -0.0062345834 0.0023896476 0.0014827158 0.0027475159 0.0007561546 0.0004561603 0.0013515552 0.0002194419 -0.0002255128 -0.0003436146 -0.0001167492 -0.0000898099 0.0000772762 -0.0000121039 -0.0002740820 0.0006925067 0.0003752331 0.0004485678 0.0001644929 0.0001407752 0.0001605049 -0.0003027147 -0.0002275800 -0.0002987289 0.0002824811 -0.0011454752 0.0001275871 0.0006264977 0.0002908652 0.0005238431 -0.0023365521 -0.0010780931 -0.0007637037 -0.0000732637 0.0000108924 0.0002011526 0.0002049040 -0.0001735115 0.0003103847 0.0018111438 -0.0023628109 -0.0030310672 0.0027768970 0.0006157667 0.0018163492 0.0002612948 0.0007506074 0.0012600658 0.0014192807 0.0000103966 -0.0006812267 0.0011624280 -0.0007585868 0.0001159306 -0.0014918298 0.0007127984 -0.0000247053 0.0013799307 -0.0001830929 -0.0001437989 -0.0011679284 -0.0004362160 0.0003634540 -0.0027156370 0.0000984725 0.0003438782 -0.0014846493 -0.0002641645 0.0003497165 0.0013266897 -0.0009470877 0.0001249386 0.0006054922 0.0016140108 -0.0007051040 -0.0042892062 -0.0005597984 0.0010922762 -0.0034723835 -0.0041578256 0.0020979478 -0.0005436633 -0.0002867388 -0.0006514237 0.0007019091 0.0004991518 0.0005963417 0.0000000474 0.0003092811 -0.0002052601 0.0002869211 -0.0002603554 0.0006852185 0.0002225452 0.0002844159 -0.0003494928 -0.0000189105 0.0012939611 -0.0012394943 0.0000156871 0.0001865232 -0.0000760311 -0.0003491793 -0.0003270615 -0.0002616248 0.0005052294 0.0002880981 0.0001755720 0.0005443742 0.0012836042 -0.0003892429 -0.0076740451 0.0007761463 -0.0013939874 0.1452981982 0.1295127649 -0.1019933147 -0.0233991857 -0.0668262236 0.1715482190 -0.0916520880 0.1176229997 0.1024594095 -0.0240618674 0.0109989468 0.0138311253 -0.0136828541 -0.0123900525 -0.0059659673 0.0095106922 -0.0917726398 -0.0823639361 0.0644523173 0.0449555590 -0.0542718707 -0.0059154410 0.0048827659 -0.0011102197 0.0015077832 0.0007297267 -0.0000112217 -0.0019080024 0.0004538683 -0.0000242559 0.0059439312 -0.0005410625 -0.0003005734 -0.0023409892 -0.0005353145 0.0002975076 0.0011309941 0.0004075248 0.0010997425 -0.0006868480 -0.0008021726 0.0006403733 -0.0013460186 0.0000007915 -0.0018390230 0.0002502998 -0.0007485164 0.0011219763 0.0025589745 0.0016198448 0.0021385249 -0.0006371575 0.0002665168 -0.0007166655 -0.0003011359 -0.0003813585 -0.0007471954 0.0006468686 -0.0000159090 0.0020953057 0.0002923944 0.0001481283 -0.0011901257 -0.0019607816 -0.0017382285 -0.0026809900 -0.0656132784 0.0746117503 0.0873574577 0.0433032894 0.0107852095 -0.0220013091 -0.0032127784 -0.0234925268 -0.0059577421 -0.0141755942 -0.0260693238 0.0004933193 0.0151254013 0.0246325219 -0.0003270598 -0.0230382800 0.0097251502 0.0175619412 0.0179900523 0.0190007316 -0.0041606732 -0.0369006907 -0.0023996409 0.0158129172 0.0194603607 -0.0726547486 -0.0399858244 0.0769084067 -0.0309518628 -0.0571962194 0.0229675894 -0.0249069729 -0.0242541040 0.0367589908 -0.0092250274 -0.0318351727 -0.0187478294 -0.0243638812 0.0061072961 0.0423888945 -0.0778540430 -0.0194018910 -0.0488819916 0.1309140883 0.0436565681 -0.0225204434 0.0981915400 0.0238717078 0.1113233368 -0.0214986169 -0.0500529718 -0.0588202592 -0.0956453190 0.0109862923 0.1308110431 -0.0544677561 -0.0639308526 -0.0504540355 -0.1334845602 0.0016847764 -0.3032901288 0.2563624750 0.1645980094 -0.0551530181 0.3985709775 0.0970057058 -0.3603292527 0.2740621520 0.1869170497 -0.0412672835 0.3773586223 0.0740334905 -0.1113775544 0.0702982340 0.0579312110 0.0148815697 -0.0079183532 -0.0043295856 -0.0010826476 0.2339448518 0.0318258648 0.0019833888 0.0014040006 0.0008919388 0.0001851103 -0.0127801887 -0.0005849606 0.0083955836 0.0106610898 0.0047954216 -0.0036451486 -0.0032223752 -0.0009685886 -0.0007042423 -0.0002467245 0.0000946719 0.0008768987 0.0003708613 -0.0001223781 0.0005740203 0.0008857613 0.0006229939 0.0004181899 0.0003025982 -0.0000439317 -0.0028037169 -0.0002867375 0.0004440023 -0.0013529034 -0.0003092486 -0.0010077340 -0.0062346508 -0.0040988800 0.0013212609 -0.0005646386 0.0011665837 0.0026338592 -0.0006652507 -0.0019497902 -0.0023998596 -0.0069157558 -0.0040970003 -0.0007563463 0.0022922519 -0.0071551053 -0.0059303314 0.0047073639 0.0017614092 -0.0018382964 -0.0008014971 -0.0010211813 -0.0009348694 0.0000959493 0.0004317928 0.0020486855 0.0005357861 -0.0006368929 -0.0003933361 0.0280976834 0.0019148548 0.0079063891 0.0002414407 -0.0215758283 0.0028273809 0.0047166925 0.0186714516 -0.0056270050 0.0137466248 -0.0083990780 0.0000138956 -0.0069807099 -0.0022027345 -0.0068590334 -0.0073164339 0.0096532926 0.0080852701 0.0116931270 -0.0044496267 -0.0009591209 -0.0121205243 -0.0016006899 -0.0072279593 -0.0030758111 0.0082130795 0.0071594236 0.0317032979 -0.0088177826 0.0112542910 0.0288112509 -0.0224622392 -0.0139747013 0.0045923517 0.0003300310 0.0011876056 0.0347864805 -0.0043582257 0.0112278251 0.0270774698 -0.0211740771 -0.0083898418 -0.0015806641 -0.0005234119 0.0011690603 -0.0007937242 -0.0010126685 -0.0023333631 0.0020666642 0.0011809197 0.0008671025 -0.0023646363 -0.0007828667 0.0011271297 -0.0003554166 -0.0007818337 -0.0020903402 0.0060418217 0.0033544544 -0.0004136741 0.0046525383 0.0026952936 0.0047702451 0.0000882435 0.0001060323 0.0001991054 0.0072751453 0.0028313834 -0.0006684725 0.0047807288 0.0033955903 0.0044919577 -0.0011698294 0.0009544755 0.0017768632 -0.0033204995 -0.0011588065 -0.0028499935 -0.0000679971 -0.0001834564 -0.0004388804 -0.0002937680 -0.0000237752 0.0001447795 0.0055911117 0.0001306935 -0.0008574850 -0.0050989755 -0.0001909302 0.0009582551 -0.0005353630 -0.0019999707 0.0008505268 -0.0029652979 0.0028151127 -0.0005915314 0.0029747532 -0.0028644334 0.0007479983 0.0036620997 -0.0102730290 0.0033563337 -0.0012406995 -0.0014747785 0.0007555886 0.0035171003 0.0013729199 -0.0011339580 -0.0005640199 -0.0019548590 0.0010618626 -0.0024431875 -0.0079275506 0.0034051487 -0.0014173453 -0.0005947913 -0.0019231917 0.0002278158 0.0001003521 0.0001892023 0.0011199675 0.0015317919 0.0006252973 0.0000594059 -0.0023664832 0.0019307692 -0.0033446860 -0.0003600815 -0.0053245500 -0.0018539494 0.0037685758 -0.0057251012 0.0009714398 0.0001230474 0.0013772961 -0.0001501676 0.0014638802 -0.0013830813 -0.0029993023 -0.0015197897 -0.0032563025 -0.0019607238 -0.0017878070 -0.0015125862 0.0027573651 0.0019130256 -0.0031518563 0.0037016117 0.0157264170 -0.0131426888 -0.0070633522 -0.0265693089 0.0283694027 -0.0218445198 0.0235636085 0.0174933862 -0.0016464470 -0.0003711492 -0.0010238810 0.0143189051 0.0328531987 0.0011604592 0.0260509548 -0.0038850939 0.0238224742 -0.0276998046 0.0087615348 -0.0065940092 0.0642567911 -0.0588866850 0.0139260666 -0.0054612228 -0.0067563744 -0.0002964900 0.0143601804 -0.0030388223 0.0000910286 -0.0669297144 0.0125286363 0.0008662744 0.0434771835 0.0130935308 -0.0068339795 0.0048480052 -0.0024461332 0.0109333828 -0.0023991586 -0.0057557958 -0.0092277985 0.0054546501 -0.0013084815 0.0094311411 0.0095387081 0.0176564119 -0.0071487438 -0.0046221867 -0.0072788155 -0.0038854485 -0.0016049393 0.0013524759 -0.0028909447 -0.0077613289 -0.0058957895 0.0025571699 -0.0019520334 -0.0016786202 0.0000229149 0.0023757367 0.0015918316 -0.0014834377 0.0013428932 -0.0002817984 0.0015115247 -0.0033623251 0.0042053987 0.0042649528 0.0035965815 0.0052215459 0.0004173738 -0.0020409051 0.0005617059 0.0013724271 -0.0046632465 0.0022702530 0.0042510614 0.0007930619 -0.0046764023 -0.0019203005 0.0019773162 0.0012840493 -0.0007763486 0.0002184045 -0.0035677351 -0.0015148849 0.0016566408 0.0047940237 -0.0000345242 -0.0003523056 0.0104144004 0.0019624713 -0.0027326574 0.0037378046 0.0028258534 -0.0001158876 0.0124897808 0.0049373008 0.0034900571 -0.0018538068 -0.0032264978 0.0006632861 -0.0048340390 -0.0016649338 -0.0008863883 -0.0045184158 0.0028131419 -0.0078749714 0.0161007942 0.0061655515 -0.0041638353 0.0114540326 0.0034357715 0.0129526932 -0.0010882940 -0.0056153246 -0.0065026040 -0.0118463441 0.0011264432 0.0162851213 -0.0060608308 -0.0079046532 -0.0051291757 -0.0177149012 -0.0004346739 -0.0335776773 0.0305090213 0.0184171702 -0.0064053363 0.0522309029 0.0109278136 -0.0410467272 0.0325074712 0.0218646325 -0.0036226464 0.0485578360 0.0087920519 -0.0096088105 0.0114318463 0.0057415523 -0.0004198526 -0.0018962259 -0.0000478989 0.0020713583 0.0171748399 -0.0030197565 -0.0343329545 -0.0244495411 -0.0107659746 0.0000292633 -0.0006888324 -0.0000352341 -0.0002013814 0.0005067942 0.0006096413 0.0000305384 -0.0000711345 -0.0000556143 -0.0001117282 0.0000890141 0.0000130712 0.0005792316 0.0004766685 -0.0004016049 0.0004941979 -0.0003492042 -0.0003139044 0.0000093120 -0.0000974427 0.0000204245 0.0001339400 -0.0002025937 -0.0002722342 -0.0001417468 -0.0000324302 -0.0001060444 -0.0073883807 -0.0060666072 0.0025166203 -0.0023080381 0.0025359632 0.0051021397 0.0020649755 -0.0036389000 -0.0024577901 0.0023768610 0.0006180165 -0.0011210879 -0.0021535484 0.0075657483 0.0017238434 -0.0049877903 -0.0004333365 0.0013017512 0.0004562221 0.0002698564 -0.0003608830 -0.0002549354 0.0005147288 -0.0003722341 -0.0000675133 -0.0003175052 -0.0001277240 0.0021723205 0.0004402207 0.0009756458 0.0003517261 -0.0007427850 0.0010552969 -0.0001756121 0.0019988116 -0.0000192518 -0.1522512327 0.0918217803 -0.0034558647 0.0799788228 0.0272378951 0.0800911507 0.0896567830 -0.1152614287 -0.0952071546 -0.1455275153 0.0544797570 0.0092229804 0.1516662095 0.0150309301 0.0846937906 0.0209207020 -0.0821728091 -0.0755310575 -0.4365769211 0.0937251243 -0.1456195624 -0.3255236979 0.2502463551 0.1548971726 -0.0051732560 0.0029893699 0.0022649223 -0.4008603612 0.0455583060 -0.1317181849 -0.2959352495 0.2247710809 0.0856145605 0.0218291190 0.0063740196 -0.0184601832 0.0145247194 0.0161570286 0.0342111128 -0.0331701948 -0.0176519969 -0.0099447175 0.0345922257 0.0114616407 -0.0182580765 0.0056918102 0.0121150008 0.0288908646 -0.0878742227 -0.0442883219 0.0027011710 -0.0628405485 -0.0482335521 -0.0706419068 0.0012803619 0.0008762247 0.0008508588 -0.0944477205 -0.0441140018 0.0090082934 -0.0672252069 -0.0556259594 -0.0665581310 0.0073244040 -0.0114023456 -0.0149112176 0.0136576611 0.0038263957 0.0109255849 0.0002838117 0.0013976002 0.0023108654 0.0030337884 0.0000559669 -0.0017080060 -0.0517037995 -0.0050296487 0.0094330676 0.0503803555 0.0052761297 -0.0107817246 0.0036353104 0.0197942548 -0.0081962893 0.0288570698 -0.0273842848 0.0057432314 -0.0238876284 0.0278028214 -0.0076614470 -0.0342063734 0.0976485913 -0.0316929576 0.0117781020 0.0134946108 -0.0069546715 -0.0331667366 -0.0126751199 0.0105898203 0.0093845866 0.0178063618 -0.0103073554 0.0225238303 0.0743887467 -0.0315670497 0.0092197782 0.0023195869 0.0143553950 -0.0024912336 0.0006938087 -0.0038770306 -0.0051159216 -0.0090438718 -0.0014665070 -0.0016422825 0.0139105615 -0.0134547103 0.0182734885 0.0010762586 0.0307908437 0.0096465645 -0.0242023668 0.0341246503 -0.0043910987 -0.0011152322 -0.0058732697 0.0012354583 -0.0075299295 0.0077595186 0.0142378646 0.0067324258 0.0169231576 0.0081319890 0.0047351266 0.0089747589 0.0001196146 0.0001141486 -0.0002820139 0.0011851309 0.0007298158 -0.0007773785 -0.0001510334 -0.0012675958 0.0027967384 -0.0017735182 0.0013706591 0.0010659009 0.0000039317 -0.0001269186 -0.0007494954 0.0028441071 0.0016047353 -0.0017676736 0.0014697321 0.0052872919 0.0079433685 -0.0049210769 -0.0034511758 0.0050582030 -0.0313170535 -0.0030060340 0.0037329979 -0.0016003994 0.0160840719 -0.0040173287 0.0038857693 0.0119311040 -0.0047774488 0.0201086519 -0.0045415476 0.0061348444 -0.0132636890 0.0098941866 -0.0043796538 0.0322171000 0.0097148481 0.0352765950 -0.0476654697 -0.0377540905 -0.0329751791 0.0046013336 0.0114021438 0.0005524592 0.0703546894 0.0558836650 0.0273458855 0.0219475649 0.0111057712 -0.0041407398 -0.0036369044 0.0026590500 -0.0090096132 0.0018202430 0.0004390166 -0.0005052969 -0.0022883654 0.0011994597 -0.0001356016 0.0016690869 0.0006627255 -0.0011927223 0.0008732993 -0.0006858144 0.0010824200 0.0006482132 -0.0009468227 -0.0010367138 -0.0042675638 -0.0045552416 0.0040136379 0.0009275430 0.0019638787 -0.0001930598 0.0011186805 0.0011960290 -0.0003876641 -0.0009518904 -0.0007631796 0.0003185585 0.0010300099 -0.0012627637 -0.0011545904 -0.0010078780 0.0003816409 0.0007431126 0.0002094496 -0.0015191400 -0.0003592353 -0.0013314092 0.0001929781 0.0006633089 -0.0042702122 0.0006536362 0.0027748711 -0.0011103731 -0.0012295170 0.0004512333 -0.0003030425 -0.0002495405 0.0000968503 -0.0002916663 0.0005075443 0.0003801718 0.0010094909 -0.0004212706 -0.0008413236 0.0005582251 -0.0009340529 -0.0003955081 0.0003694353 -0.0005900442 -0.0002410163 -0.0006056284 -0.0000936449 0.0002399570 0.0002891259 0.0006410551 -0.0000454591 -0.0009337737 0.0003001056 0.0004515010 0.0001823809 0.0011411812 0.0000883599 0.0015974298 -0.0016294195 -0.0008068760 0.0003415304 -0.0030545297 -0.0004380557 0.0018720502 -0.0016020735 -0.0010474159 0.0000659294 -0.0029168983 -0.0004441882 0.0001861767 -0.0008948244 -0.0001934846 -0.0004513937 0.0009639781 0.0002387320 0.0016278712 -0.0077920337 -0.0013373971 -0.1482605123 -0.1036255653 -0.0550291712 -0.0003425982 -0.0000288820 -0.0005215663 -0.0004147166 -0.0003589434 -0.0000476237 0.0003735077 0.0003148388 0.0000552533 0.0000485475 -0.0001084144 -0.0000086909 0.0006521148 0.0004452389 -0.0002815031 0.0000154853 -0.0001137913 -0.0000864310 -0.0000243807 0.0000753916 -0.0000604551 0.0000341707 0.0000131856 -0.0000049467 0.0000182962 -0.0001587090 -0.0000954411 -0.0088921978 -0.0055025429 0.0023479829 -0.0025522563 0.0039273946 0.0041038020 0.0011655608 -0.0042029687 -0.0032548677 0.0007622490 0.0004851181 -0.0008605400 -0.0000701170 0.0012855054 0.0014918688 -0.0017102551 -0.0003099004 0.0006343422 -0.0004610534 -0.0002058046 0.0005599521 0.0002690373 -0.0005382880 0.0000446524 -0.0001741759 0.0002559007 0.0000126361 -0.0001182876 0.0003916590 0.0006054589 0.0002548328 0.0006683429 0.0004004289 -0.0003930267 0.0007078096 0.0002552289 0.0368239058 -0.0191740676 0.0012061616 -0.0152528462 -0.0072056126 -0.0172588244 -0.0217633245 0.0254598274 0.0202811738 0.0332266549 -0.0108201918 -0.0001993005 -0.0344872176 -0.0036871138 -0.0193511764 -0.0048491710 0.0177070857 0.0165588061 0.0910790050 -0.0198907116 0.0271828607 0.0708662635 -0.0560850043 -0.0360849066 0.0009829917 -0.0003917404 -0.0000957270 0.0879615886 -0.0101848803 0.0281569406 0.0662228807 -0.0492321107 -0.0204760288 0.0903171356 0.0261488825 -0.0738055630 0.0599882653 0.0673256103 0.1447287673 -0.1329302901 -0.0738195862 -0.0508705402 0.1464029959 0.0509067225 -0.0681753754 0.0148501419 0.0436137042 0.1144730883 -0.3672967478 -0.1790512676 0.0127065364 -0.2574495641 -0.1953079164 -0.2839716698 0.0052627354 0.0027593314 0.0025392573 -0.3900628408 -0.1782974774 0.0462883309 -0.2684932365 -0.2142594450 -0.2516391825 -0.0013681208 0.0022016469 0.0028788858 -0.0031784219 -0.0009075305 -0.0025760834 0.0014035085 0.0066073526 0.0108915973 0.0114206489 0.0001502977 -0.0065681520 0.0306654907 -0.0047817305 -0.0028148909 0.0056751655 0.0012669070 -0.0024066688 -0.0214584165 -0.0124528954 0.0082959547 -0.0072609889 0.0355532806 -0.0123826779 0.0714469745 -0.0235293664 -0.0020485015 0.0496834878 -0.0675465626 0.0174476011 -0.0243206115 0.0087694692 0.0015594082 0.0061684682 -0.0258394062 0.0085137799 0.0784672837 -0.0030149126 -0.0183600296 0.0410175784 0.0170552712 -0.0132860304 0.0160724578 0.0041242360 0.0213627419 -0.0376224823 -0.0109295988 -0.0455513407 0.0152339290 0.0035997050 0.0221842226 -0.0180093570 -0.0188785802 -0.0137706483 -0.0324652513 -0.0207427116 -0.0370389556 -0.0175312429 -0.0364065074 -0.0002740209 0.0061751950 -0.0203366569 0.0255097291 0.0259798045 0.0527812384 -0.0018119516 -0.0536286501 -0.0506927962 -0.0391130963 -0.0630168085 -0.1283851489 0.0048419060 -0.0001940140 0.0001579837 -0.0000635355 0.0028699668 -0.0016293582 0.0010136768 0.0008223392 0.0014499463 0.0018605486 -0.0005885842 -0.0015341490 -0.0010958724 -0.0001567569 -0.0004242978 -0.0015769679 0.0098183789 0.0050378765 -0.0055664739 0.0070006753 0.0099805399 0.0201115432 -0.0104437134 -0.0081426857 0.0114054686 0.0323299112 0.1105392736 -0.0434771200 -0.0782652329 -0.0541786935 0.0270374022 0.0089658957 -0.0545284223 0.0187546010 0.0475873963 0.0543751868 -0.0246602396 0.0110497512 -0.1081599546 0.0423399956 -0.0306262444 -0.1201834837 0.0647050347 -0.0301626310 0.0495281933 -0.0775306441 -0.0166902042 -0.0590711671 0.0320195339 0.0148210242 0.1184811314 -0.1080802436 0.0426731065 -0.0420441573 0.0998605724 0.0019737921 0.0057743191 -0.0070635961 -0.0009018290 0.0045993771 -0.0030961436 -0.0017116028 0.0042575313 0.0004980769 0.0012711392 -0.0005147661 -0.0007905028 0.0003595171 -0.0013126298 0.0001112190 0.0010131337 -0.0005360418 -0.0011034987 -0.0004852756 -0.0007887933 0.0003300750 0.0002525002 0.0000815443 -0.0001640122 0.0000396677 -0.0003855960 -0.0001825513 -0.0001486274 0.0003236642 0.0002297995 -0.0000805861 -0.0002397841 -0.0000442800 0.0000513920 0.0006183490 0.0001748352 -0.0000406819 -0.0004548576 -0.0001439245 -0.0003357811 -0.0007744521 -0.0004388133 -0.0002886383 -0.0002179723 -0.0000261042 0.0001262696 -0.0012525594 -0.0004571382 -0.0002950360 0.0003132942 0.0003226364 0.0005726493 -0.0007312958 -0.0002637241 -0.0018699514 0.0011055571 0.0004719742 -0.0005537723 0.0008587619 0.0003168895 -0.0002797930 0.0004929771 0.0001945904 0.0004951704 0.0000686573 -0.0001835298 -0.0002603667 -0.0006228848 0.0000104360 0.0007647573 -0.0002669109 -0.0003444174 -0.0001330460 -0.0008784045 -0.0000676381 -0.0011584417 0.0012170456 0.0005869131 -0.0001296639 0.0030264322 0.0007664108 -0.0018934750 0.0015545236 0.0007961698 -0.0000348827 0.0022333299 0.0003610975 -0.0002411192 0.0006514346 0.0002449725 -0.0000174395 0.0001428008 -0.0000128759 0.0006631870 0.0001238265 0.0008443244 -0.0319291106 -0.0298952666 0.0078927327 -0.0001103620 0.0013491508 0.0004996749 0.0003190948 -0.0010420021 -0.0008043034 -0.0001218232 0.0000310378 0.0000252775 0.0001372375 0.0000434519 0.0000282858 -0.0001545960 0.0000980856 0.0001386880 -0.0000985503 0.0007330886 0.0002629802 -0.0000447642 0.0000622706 -0.0000428679 -0.0001415878 0.0002119807 0.0001751878 -0.0000799664 0.0001874885 0.0001457679 0.0015382434 -0.0006762767 0.0008956509 0.0005952610 0.0001770433 -0.0020690893 -0.0009641733 -0.0007664026 -0.0009528373 -0.0058547178 -0.0034285414 0.0005349481 0.0026410571 -0.0092778553 -0.0019627601 0.0036126806 0.0019928692 -0.0019978733 -0.0005456218 -0.0003780734 0.0002351851 0.0003502044 -0.0007952113 0.0004886698 0.0003283972 0.0004016799 0.0001967641 0.0001415440 -0.0008781705 -0.0011850834 -0.0003523567 -0.0009503434 -0.0003202871 0.0004204643 -0.0013367602 -0.0002733467 0.0099151718 -0.0201122765 0.0017671877 -0.0105968232 0.0012595103 -0.0077093325 -0.0049432737 0.0126056931 0.0115706897 0.0084310508 -0.0119408012 -0.0109903724 -0.0130945248 0.0038488989 -0.0027188030 0.0057667443 0.0038778452 0.0044638498 0.0448100713 -0.0115937682 0.0240995008 0.0276512247 -0.0171830695 -0.0058070611 -0.0005741862 -0.0011431092 -0.0021039146 0.0322270969 0.0001728032 0.0181550065 0.0121631972 -0.0105616449 0.0074652979 -0.0000059141 -0.0030014790 -0.0176030521 0.0210355414 0.0148408906 0.0150386946 -0.0355521191 -0.0104567276 0.0190972801 0.0270215138 0.0063515001 -0.0251750598 0.0138463871 0.0171965729 0.0243558471 -0.0252905951 -0.0254334128 -0.0134492426 -0.0348816172 -0.0364653196 -0.0668448962 -0.0005937719 0.0033997720 0.0041693645 -0.0607260070 -0.0341215995 -0.0085582537 -0.0564179243 -0.0622743378 -0.0754555104 -0.0012684264 0.0018713799 0.0025086051 0.0008305342 0.0002139645 0.0006193826 -0.0004921410 -0.0018335407 -0.0025658704 0.0054905955 -0.0000283479 -0.0028203214 -0.0851634164 0.0393124536 -0.0031128569 -0.1103131210 -0.0248969106 0.0282672047 0.0872478252 0.0281412745 -0.0249726213 -0.0053018136 -0.1121598341 0.0437437166 -0.2659626625 0.0642072043 0.0161788762 -0.1580883576 0.1510513502 -0.0309448643 0.0828606839 -0.0517959303 0.0031465795 0.0195876073 0.1209259188 -0.0484585020 -0.3150830346 -0.0138588579 0.0821869831 -0.1863366580 -0.1552492417 0.0883980594 0.0761955902 0.0045455892 0.1180578630 0.0672244594 0.0533436566 0.0508641506 -0.0654159328 -0.0769170072 -0.0459645365 0.0106565204 0.1326289434 -0.0864321564 0.1813214530 0.0324336903 0.2851684402 0.0978389902 -0.1336034930 0.2545060287 -0.0503611985 0.0168092643 -0.0901194087 -0.0248373759 -0.1291868822 0.0637492056 0.1982851526 0.1265004798 0.1963797979 0.1467371398 0.2040858879 0.0644450701 -0.0001593828 -0.0001055263 -0.0000043728 0.0001357406 -0.0020595793 0.0014173481 0.0007304460 0.0016848011 -0.0004949496 0.0004549581 -0.0018306823 -0.0013417394 -0.0000138959 -0.0000739632 -0.0003430114 0.0009367542 -0.0017230516 -0.0013744081 -0.0007331684 0.0027078262 0.0024804818 0.0009997515 -0.0028994607 0.0032507670 0.0649223460 0.0927970714 -0.0392073294 -0.0516992871 -0.0547974937 0.0225391110 -0.0114428224 -0.0486851454 0.0189015174 0.0507773128 0.1280098788 -0.0774411928 0.0158115931 -0.1115305563 0.0427121187 0.0265976857 0.0884831471 -0.0387125737 0.0017032702 -0.1050243709 0.0976429736 -0.0034904403 0.0327319876 -0.0338980768 0.0193413969 -0.0591029591 0.0872994965 -0.0059683622 0.0337015245 -0.0483674672 -0.0014336089 -0.0056099304 0.0035588499 -0.0007104682 0.0070796703 -0.0027640917 0.0030492565 0.0004077288 0.0013602674 -0.0020474282 -0.0009336295 0.0011152300 -0.0016339282 0.0004971849 -0.0030199210 -0.0091030655 0.0082881491 0.0114365872 -0.0025227160 -0.0110466917 -0.0021869644 0.0051883179 -0.0027310096 -0.0040715574 0.0036881707 -0.0088322226 -0.0059984297 0.0001744647 0.0112545147 0.0037122915 -0.0083974711 -0.0008510575 0.0048468159 0.0034082533 0.0094227074 0.0014384741 -0.0097485465 -0.0099746812 0.0016869565 0.0018037730 -0.0320439501 -0.0110832137 0.0166524981 -0.0121210005 -0.0143073951 0.0048147617 -0.0233081311 -0.0122595117 0.0002898000 0.0014961636 0.0001110577 -0.0023308303 0.0028684750 0.0024171677 0.0049156221 -0.0023666924 -0.0052447051 0.0026258772 -0.0035010839 -0.0017532246 0.0014851063 -0.0019539248 -0.0009178717 -0.0020597442 -0.0005770083 0.0007698772 0.0011077185 0.0020743427 -0.0001888306 -0.0034739789 0.0011926336 0.0016796544 0.0003992526 0.0039731938 0.0004202562 0.0043181533 -0.0051189815 -0.0025144821 0.0010402339 -0.0113676082 -0.0022895422 0.0073188624 -0.0061421995 -0.0039831516 -0.0000379688 -0.0099432451 -0.0014584890 0.0001981242 -0.0034254349 -0.0005744914 0.0046442197 0.0015293143 -0.0006814064 -0.0027109502 0.0403112604 0.0073469404 -0.0109378762 -0.0024481648 -0.0159899855 -0.0002912438 0.0000960375 0.0002489564 0.0013859653 -0.0000790150 -0.0006688951 -0.0004665181 -0.0002737076 0.0000292547 0.0000326680 0.0000087375 -0.0000985290 -0.0001935679 -0.0004582357 0.0003734669 -0.0002925251 0.0011168692 0.0002842156 0.0000261131 0.0000905650 0.0001148113 -0.0005469769 0.0002996288 0.0004661690 -0.0000103805 0.0001171826 0.0000896922 0.0034623185 0.0044553793 -0.0021370044 0.0012997883 -0.0005092832 -0.0037794164 -0.0021421226 0.0021993970 0.0011634203 -0.0064208996 -0.0033182384 0.0031192511 0.0029228083 -0.0118876280 -0.0043767490 0.0074371897 0.0003862846 -0.0017209630 -0.0003187618 -0.0003232603 -0.0001983491 0.0002134797 -0.0003078527 0.0000325358 0.0000304988 0.0000507299 0.0000671437 0.0003031144 -0.0007492851 -0.0009959956 -0.0005982062 -0.0017938629 -0.0012056211 0.0009132133 -0.0012351340 -0.0007223411 -0.0183992324 -0.0028911453 0.0005543587 -0.0031238791 0.0063961043 0.0031966698 0.0124114455 -0.0062800940 -0.0026749873 -0.0146720968 -0.0033668672 -0.0095749815 0.0141459291 0.0043890054 0.0100650179 0.0049017227 -0.0058280618 -0.0060684698 -0.0130332027 0.0018068292 0.0080126488 -0.0192280584 0.0210060624 0.0189004731 -0.0022518628 -0.0005695090 -0.0018372407 -0.0286444608 0.0052955303 -0.0038839184 -0.0287615113 0.0174069304 0.0164611586 0.0138529244 0.0050781086 -0.0025013090 0.0000598110 0.0042961037 0.0180222071 -0.0012732800 -0.0069805946 -0.0227006747 0.0110420804 0.0065456142 0.0055049000 -0.0086873383 -0.0051193311 0.0023893471 -0.0464332983 -0.0136990048 0.0082623829 -0.0232943967 -0.0117479123 -0.0097537541 0.0005332005 -0.0021927526 -0.0027264134 -0.0299811137 -0.0088181371 0.0159168967 -0.0089876739 0.0049162610 0.0087334211 -0.0000358034 -0.0000073095 -0.0000003559 0.0032569558 0.0009400856 0.0026023111 0.0006691438 0.0027130459 0.0042014305 -0.0011238594 0.0000345744 0.0004621532 -0.0933177707 0.0073444038 0.0109313871 -0.1335235143 -0.0143618534 0.0335221863 0.0891502491 0.0520721614 -0.0347578831 0.0065527607 -0.1606702990 0.0603895869 -0.2788500152 0.0932220675 0.0075369356 -0.2011168291 0.2028427509 -0.0438299214 0.0758291780 -0.0712255070 0.0114958215 0.0438129225 0.1679886101 -0.0704008849 -0.3440269845 -0.0339342964 0.0955275004 -0.2294746303 -0.2024658394 0.1136194634 -0.0643742836 -0.0152748156 -0.0983708399 -0.0451536652 -0.0122384475 -0.0548822076 0.0462104409 0.0692681855 0.0200690543 -0.0029287315 -0.1301038931 0.0968403608 -0.1434452081 -0.0109432805 -0.2318920694 -0.0849274100 0.1260364501 -0.2294182325 0.0318545316 -0.0322498488 0.0748403739 0.0330782698 0.1358004674 -0.0564215725 -0.1530001325 -0.1170737459 -0.1373257649 -0.1375444586 -0.1982819724 -0.0545162610 0.0001220022 0.0000592124 -0.0000153780 -0.0008096006 -0.0004621107 0.0004351549 -0.0001082210 -0.0004147557 -0.0003458302 -0.0003108856 -0.0003254124 -0.0002882322 -0.0000186310 -0.0002175506 0.0002212190 0.0012013772 0.0038794778 0.0007785770 0.0030111855 -0.0029498071 -0.0000818747 -0.0011283846 0.0025532794 -0.0033592333 -0.0003042598 0.0076345574 -0.0024826096 -0.0079851909 -0.0017071137 0.0013823746 0.0022866916 -0.0023412669 0.0005799581 0.0054944342 0.0047889122 -0.0034270502 -0.0060403114 -0.0082953774 0.0034285682 -0.0013812559 0.0054199891 -0.0069558022 0.0009498679 -0.0036710517 0.0053469093 0.0017913894 0.0021300316 0.0005076984 -0.0009378548 -0.0047968204 0.0037141303 -0.0039338442 0.0001771691 -0.0055308302 0.0025863314 -0.0020470213 0.0029434425 0.0036654244 0.0030517991 0.0010061623 -0.0014848927 0.0020499370 -0.0071727333 -0.0020849832 -0.0021388199 0.0040243194 0.0072411785 0.0023301741 0.0087179138 0.1293462635 -0.1153890600 -0.1586833693 0.0614479136 0.1588071939 0.0200883227 -0.0792134810 0.0200212742 0.0542029167 -0.0438561943 0.1211396604 0.0778625664 0.0050822866 -0.1387780691 -0.0509252504 0.1074206360 0.0215997683 -0.0581807109 -0.0439721605 -0.1363227194 -0.0239084387 0.1258557640 0.1431935049 -0.0160996858 -0.0085104779 0.4194069336 0.1470451384 -0.1921550624 0.1593166982 0.1724113579 -0.0626508547 0.3174062323 0.1636979132 -0.0000703393 -0.0201311183 -0.0052425433 0.0221784150 -0.0325800843 -0.0240592972 -0.0560145429 0.0238136252 0.0560188079 -0.0254071951 0.0339164862 0.0172985786 -0.0144002610 0.0194874629 0.0090074968 0.0169607249 0.0079512712 -0.0058650858 -0.0109440474 -0.0175662131 0.0021269500 0.0340220548 -0.0132498214 -0.0165475203 -0.0027381055 -0.0402998502 -0.0047842367 -0.0340834641 0.0454433137 0.0203095969 -0.0095078787 0.1113450139 0.0240367965 -0.0693259414 0.0569297810 0.0364166971 0.0019522931 0.0946528815 0.0133254523 -0.0027640371 0.0330634097 0.0060512962 -0.0566767269 -0.0259981032 0.0061810401 -0.0040304555 -0.5493595882 -0.0520751855 0.0005343662 0.0011180774 0.0001305905 -0.0011226093 0.0071616097 0.0044906728 0.0029400590 -0.0054888541 -0.0045912719 -0.0014955466 -0.0002965800 0.0000867533 0.0005463774 0.0003269936 -0.0003395010 -0.0007728234 -0.0009774365 0.0002494152 -0.0011217683 -0.0002154699 0.0001839314 -0.0002157872 -0.0001736629 0.0002684631 -0.0009194588 0.0009595819 0.0007566737 -0.0006916370 0.0010797756 0.0007995748 0.0068953233 0.0094740274 -0.0048634485 0.0012920340 -0.0030327234 -0.0025844883 0.0005758198 0.0056224810 0.0052644395 0.0006798970 0.0007579939 0.0042139397 -0.0001928123 -0.0057452210 -0.0055361772 0.0120072125 0.0016177051 -0.0023681029 0.0008033317 0.0004647960 -0.0008506739 -0.0001832025 -0.0000065174 -0.0002005172 0.0009740972 0.0006326438 0.0007643410 0.0036174511 -0.0031734523 -0.0041013040 -0.0021744158 -0.0057763233 -0.0016459498 0.0034043256 -0.0044618832 -0.0025205109 0.0034600737 -0.0040637030 -0.0007025824 -0.0022268162 -0.0005491998 -0.0021758448 -0.0029453666 0.0036432160 0.0026565465 0.0042077813 -0.0015242654 -0.0001347594 -0.0066069841 0.0001894218 -0.0028160524 0.0014796169 0.0014750550 0.0020500787 0.0243014716 -0.0024404769 0.0093146627 0.0084471173 -0.0082899455 -0.0020836109 0.0025475576 0.0002905183 0.0011030211 0.0129872172 -0.0008242003 0.0051677043 0.0071554871 -0.0042299259 -0.0001111259 0.0009204071 0.0004534680 0.0002508341 -0.0008883471 -0.0004640433 -0.0000040064 -0.0000993916 -0.0004474373 -0.0014404166 -0.0014167885 -0.0004190264 0.0009701993 0.0000061457 -0.0004587231 -0.0009144842 -0.0002861346 0.0004032255 0.0005270895 0.0005610203 0.0014817091 0.0023012084 0.0069511485 0.0011631357 -0.0010811662 0.0036450958 0.0010836817 -0.0000841801 0.0022408422 0.0033894320 0.0023981577 -0.0005411189 0.0003749131 0.0006197957 -0.0017604665 -0.0005689396 -0.0014551943 -0.0007577756 -0.0007636454 -0.0011566524 -0.0044999687 0.0001121813 0.0022807091 -0.0048011332 0.0009885178 0.0003040908 -0.0062642007 -0.0014045816 0.0018966262 0.0032340816 0.0024396982 -0.0014762117 0.0007668433 -0.0072351611 0.0026405571 -0.0111899057 0.0040872857 0.0001177946 -0.0082655604 0.0086240060 -0.0019720707 0.0026472201 -0.0030219724 0.0005822264 0.0022078575 0.0073557552 -0.0031386678 -0.0141766675 -0.0015707509 0.0039341289 -0.0093015579 -0.0082377722 0.0046011624 -0.0024986324 -0.0000978033 -0.0043627976 -0.0031491305 -0.0013567625 -0.0033836425 0.0019241069 0.0028960163 0.0008535613 -0.0002990952 -0.0058524282 0.0040964808 -0.0064808770 -0.0007654659 -0.0104020460 -0.0036415605 0.0044511635 -0.0092155074 0.0010573347 -0.0019724480 0.0032196748 0.0021208236 0.0068849290 -0.0021800950 -0.0067329888 -0.0056594334 -0.0056789080 -0.0065217013 -0.0102386017 -0.0019748835 -0.0000540140 -0.0013077814 0.0003158937 -0.0075498039 0.0008894319 -0.0007729853 0.0009510946 0.0034580556 -0.0086405196 0.0053121610 -0.0007723387 -0.0007633544 0.0004282665 0.0013583454 -0.0021723773 -0.0035252888 -0.0200247634 -0.0067078115 -0.0096867896 0.0090622554 0.0016420487 0.0091741261 -0.0139277108 0.0181116976 -0.0002820790 -0.0001396320 -0.0002508725 -0.0017398633 0.0001922627 0.0002391408 0.0009825893 -0.0001021871 -0.0000936561 -0.0002315782 0.0003858021 -0.0000512687 0.0002951686 -0.0005313414 0.0004290804 0.0011302511 -0.0016793655 0.0035030699 -0.0006500775 -0.0001145808 -0.0008636005 -0.0018818330 -0.0010391466 -0.0015905891 0.0017501881 0.0023127189 -0.0004027493 0.0038874579 0.0016311787 0.0049973342 -0.0010808028 0.0005209665 -0.0023189825 -0.0002725540 -0.0012384737 -0.0018260377 -0.0003406775 -0.0010473173 0.0067667290 0.0028479492 0.0008928824 -0.0052295676 -0.0036546179 0.0002764432 -0.0080706421 -0.2688659287 0.2000421731 0.3228228542 0.0960407981 0.0887666440 -0.0240557751 -0.0505578758 -0.0353599214 0.0184468914 -0.0192378125 0.0424601457 0.0301412768 0.0292328374 -0.0046098211 -0.0190608179 0.0200637071 0.0327175816 -0.0009517005 -0.0014301944 -0.0642078718 -0.0230868897 -0.0187100254 0.0376171936 0.0219079730 0.0333571241 0.0440424458 -0.0087514640 0.0090454983 0.0455461587 0.0113298582 -0.0031139888 0.1341310580 0.0607279198 0.0950750136 -0.0609737608 -0.0952666626 -0.1186876221 0.1035061464 0.0646571035 0.3009284504 -0.2187202866 -0.0723670617 0.0402046102 -0.0479121343 -0.0157065901 0.0320537510 -0.0049190574 -0.0146487512 0.0017972099 -0.0207454813 -0.0053338311 0.0058804117 0.0253217738 -0.0002909742 -0.0339250404 0.0035887480 0.0145659958 -0.0135322934 0.0345087195 0.0096595895 -0.0163176506 -0.0124551810 0.0196014071 0.0095166537 -0.1291815921 -0.0120271532 0.0401010281 -0.0490601176 -0.0214839964 -0.0200509212 -0.0757516186 -0.0004585111 -0.0377385138 -0.0543470269 0.0117641468 0.0029142959 -0.0199694867 -0.0042320461 -0.0336096606 0.1319304237 0.0579138552 -0.0014228389 -0.0005870051 0.0015313219 0.0001340515 -0.2332003602 -0.1048081311 0.0967608909 0.2800209306 0.1429802788 -0.0706273518 -0.0700595336 -0.0157560316 -0.0083603906 -0.0045089661 0.0011380348 0.0063704200 0.0024809794 -0.0000143449 0.0064297000 0.0025319656 -0.0013169540 0.0062713773 0.0037035487 0.0003314454 -0.0089975130 -0.0269853044 -0.0110014769 0.0104928428 -0.0060874667 -0.0089774919 -0.0040292324 -0.0055338626 0.0002882211 0.0157955939 -0.0238018314 0.0026602934 -0.0150765797 0.0112158290 -0.0033762340 0.0045931322 0.0030784089 0.0123673625 -0.0017683848 0.0241172643 -0.0336710769 0.0012394941 -0.0114291968 0.0077429111 -0.0041565106 -0.0078061604 -0.0079708053 -0.0023665971 0.0155398252 0.0168607868 -0.0033297504 -0.0127989699 -0.0085905170 0.0557767430 0.0523720355 0.0721946662 0.0101282906 -0.0561899706 -0.0288090145 0.0157665445 0.0964329000 -0.0106734353 -0.0004959009 0.0031065429 0.0030297938 -0.0010044175 -0.0004005622 -0.0007879413 0.0001251485 0.0011640874 0.0016676244 -0.0011758988 -0.0013724465 -0.0021771813 0.0015648262 0.0008497777 0.0014360454 0.0013332785 -0.0027503975 -0.0025892322 0.0009285430 0.0006833117 -0.0025406654 -0.0001877884 0.0036829748 0.0000920952 -0.0019298918 -0.0060244790 -0.0095027526 -0.0033016152 -0.0004948196 0.0012078698 -0.0054727220 0.0024487464 0.0017521874 0.0012253744 0.0004529155 -0.0002523365 -0.0004124777 -0.0003269119 -0.0002126105 -0.0011473683 -0.0005451762 -0.0002241737 -0.0015962212 -0.0005741313 -0.0001224127 0.0009199930 0.0004243140 -0.0007466294 -0.0018907145 0.0022718395 -0.0001446333 0.0034331635 -0.0014303933 0.0036089913 0.0086656667 0.0010990810 -0.0014983774 0.0066595967 -0.0013434725 -0.0005064884 0.0017253423 -0.0000943855 -0.0002668576 -0.0013995665 0.0034343781 0.0043217662 0.0032156396 0.0015796066 0.0036728551 -0.0010801915 -0.0006248731 -0.0015502345 -0.0054437915 0.0001555937 0.0027406624 -0.0006638630 0.0002225476 0.0000511534 0.0001984120 -0.0001673616 0.0000369256 -0.0000499755 0.0001553348 -0.0000845780 0.0003061769 -0.0003314852 0.0000569832 -0.0003007173 0.0003066822 0.0001844772 -0.0001974155 0.0007275835 -0.0000705303 0.0001325707 0.0000630692 -0.0000931181 -0.0001620641 0.0000162340 0.0000056483 -0.0002565475 0.0002997836 0.0003447850 0.0001035558 0.0005416891 -0.0000182612 -0.0000590803 -0.0004689067 0.0004247889 0.0011633092 0.0009346941 0.0007925975 -0.0001718964 -0.0001562844 -0.0003062882 0.0002085424 0.0003513186 -0.0000352035 0.0001759206 0.0006344556 0.0011630317 -0.0001649884 0.0008260308 0.0000216966 0.0002870487 0.0004841894 -0.0000772762 -0.0006760139 -0.0011574080 -0.0002051393 0.0001756183 0.0009607352 0.0006281003 0.0003668859 0.0019234324 -0.0000682786 0.0107084160 0.0268816364 -0.0053231058 0.0843538678 0.1423849257 -0.0971249725 -0.0564150426 -0.1324479814 0.0836964064 -0.0148617119 0.1269945389 0.0783284700 -0.0099925635 0.0170167379 -0.0015300603 0.0734571688 0.1535586347 0.0081342064 0.1617354226 0.0019719466 0.1554357706 -0.2780757466 0.0469532502 0.0251238664 -0.0609847290 -0.1520007351 0.0669454976 -0.1048680835 0.1229762518 -0.0210676683 0.0552061667 0.0934391665 -0.0423312787 0.1218219720 -0.2106592693 0.0944698581 -0.1459285300 0.2197882148 -0.0814934699 -0.0320498434 -0.0698867985 0.0082562174 0.0150561578 0.0949356118 -0.0353724742 -0.0102689655 -0.0174539754 0.0023719097 0.0129655724 0.0343085824 -0.0177902886 0.0039245817 -0.0118518527 0.0188622125 0.0017111123 0.0049240388 -0.0003578108 0.0180108452 -0.0055925786 0.0011763050 -0.0007666811 -0.0005891132 0.0009217230 -0.0002272199 -0.0000971396 -0.0007982824 -0.0000528293 0.0001445384 -0.0009159929 -0.0050781608 0.0052937853 0.0072693448 0.0010676875 0.0020781756 0.0000500361 -0.0014142605 -0.0002437793 0.0007737166 0.0000847606 0.0004981060 0.0001865337 0.0008217242 -0.0007322736 -0.0007516503 0.0017285001 -0.0005249829 -0.0012666525 -0.0005376084 0.0005407740 0.0005195765 -0.0016741831 0.0003865371 0.0011599442 0.0008586847 0.0010485072 -0.0002862355 -0.0022794811 0.0011693297 0.0017875939 -0.0004962424 0.0000603140 0.0006633946 0.0032541996 -0.0014463755 -0.0032935216 -0.0032286777 0.0017181074 0.0029761511 0.0027283492 -0.0028719674 -0.0030585716 -0.0024008101 -0.0017746860 0.0008540124 0.0044091514 0.0008642162 -0.0017364317 0.0038668216 -0.0020850761 -0.0019334855 0.0016086010 0.0007699157 -0.0007298446 -0.0044728809 0.0015488676 0.0018293164 -0.0022572721 0.0013562469 0.0011754016 -0.0039387669 0.0027965646 0.0021656699 0.0025611876 -0.0090725630 -0.0002355934 0.0049802752 -0.0050135554 0.0025177559 -0.0028132769 -0.0022802338 0.0009112515 -0.0038126672 -0.0043879452 0.0007504402 0.0001872262 0.0001010144 -0.0000974976 0.0004907455 0.0017227032 0.0010118660 0.0019640958 -0.0050963142 -0.0136306992 0.0000214956 0.0003658416 0.0002173178 0.0000385776 -0.0003870974 -0.0003159192 0.0000207817 0.0000332097 0.0000180730 -0.0000534761 0.0000243209 0.0000370929 -0.0000031033 0.0000143718 -0.0001096128 -0.0004468792 -0.0002184118 -0.0005136846 -0.0000755545 -0.0001021660 0.0000670125 -0.0000748335 0.0000344891 0.0000694092 -0.0000489067 -0.0000071589 -0.0000152843 -0.0000660829 -0.0001991159 0.0000683148 -0.0001261647 -0.0003203356 0.0007428471 0.0005159650 0.0001211969 0.0002695268 0.0057146524 0.0041222499 0.0043912464 -0.0014736935 0.0040480989 -0.0006515043 0.0020746686 -0.0041276569 0.0022570188 0.0011776736 0.0008467675 -0.0011512899 -0.0005414703 0.0009680095 -0.0002168683 0.0006557816 -0.0009162219 -0.0002098665 0.0005136481 0.0002179792 0.0004084971 -0.0000007900 -0.0002046911 0.0000864201 0.0001454414 0.0004397688 -0.0001459586 -0.0141318139 -0.0421797956 -0.0687745187 0.0363242127 0.0171688922 0.0426278199 0.0138800572 -0.0535479895 -0.0557387622 0.0298906475 0.0718260893 0.0980671477 -0.0380106346 -0.0311153786 -0.0509355197 -0.0219026465 0.0484922225 0.0441254121 -0.0762814696 0.0377165009 -0.0087076586 -0.0749206671 0.0189006641 -0.0079674877 0.0142157250 0.0299547199 0.0537953961 0.0565308198 -0.0357028323 -0.0232678126 0.0813952325 -0.0420316684 -0.0142017570 -0.0110386177 -0.0037234199 0.0063697479 0.0032766176 -0.0014888473 -0.0116299132 -0.0113106023 0.0010637653 0.0217032999 0.0121252062 0.0028154781 -0.0107100095 0.0000792956 0.0037477642 0.0106173601 0.0155198573 0.0067512752 0.0012080826 0.0112427717 0.0037008167 -0.0034159720 -0.0043005462 0.0039329211 0.0081336764 -0.0128972719 -0.0082267245 -0.0062784458 -0.0126417551 -0.0102208766 -0.0060269602 0.0111829379 -0.0203612096 -0.0287394800 -0.0258226283 -0.0098276093 -0.0246536203 -0.0003422108 -0.0033223925 -0.0054420530 0.0049587185 -0.0002837264 -0.0030359327 -0.0013944834 -0.2781160313 0.1125103236 -0.0074501780 0.2864621894 -0.1188224252 -0.0912170131 0.1390354817 -0.0395358560 0.0983778453 -0.2475901033 0.0789072172 0.1379847393 0.1359644834 -0.0761473948 -0.1411921460 0.2074119807 -0.0553222797 -0.1118815437 -0.1326107314 0.0713732801 0.1364865883 0.2364017444 -0.1128078944 0.1421922331 -0.1817002200 0.0396205691 -0.1738266792 -0.2138300415 0.1066052469 -0.0082212193 -0.0493833594 0.0320399530 0.0177532607 0.0471532439 -0.0160690262 -0.0086530178 0.0172446501 -0.0276305874 0.0068292659 -0.0304843751 0.0348835610 0.0283559148 0.0368836332 0.0165976940 -0.0099143180 0.0300955318 -0.0378674133 -0.0143144617 -0.0224692487 -0.0034775425 0.0155955994 0.0371682534 -0.0055006639 0.0135067566 -0.0130734454 0.0301020661 -0.0168173189 -0.0296775397 -0.0031246594 -0.0000151112 0.0000206657 -0.0000650801 0.0001664875 -0.0006943227 0.0005115079 0.0001678903 0.0000854854 0.0004530758 -0.0004537886 -0.0004487808 -0.0002941682 -0.0001305674 0.0000278311 -0.0001142743 0.0007445805 -0.0004813581 -0.0007947418 0.0004973346 0.0001727879 0.0009927078 0.0007999111 -0.0009263364 0.0011121101 0.0328368903 0.0223069777 -0.0121390482 0.0607245301 -0.0318689734 0.0012489721 -0.0379690631 -0.0183496593 0.0111874651 -0.0340240916 -0.0150878484 0.0026915620 0.0224888653 -0.0151611919 0.0083394642 -0.1065346688 -0.1844169044 0.0145893497 0.0919707762 0.1740780272 -0.0197683039 0.0694052843 -0.0572467691 0.1457585865 -0.0455443185 0.1096940047 -0.1630005014 -0.1863759402 -0.1522176139 -0.0815214730 0.0109317513 0.0036569726 0.0074841124 -0.0051602833 -0.0037804198 0.0002382125 -0.0014975909 0.0014207163 -0.0000715683 0.0008334440 0.0001795183 -0.0002893662 0.0000849120 -0.0002890525 0.0005289833 0.0200134748 -0.0205220679 -0.0232251185 -0.0067426008 -0.0091128710 -0.0004359745 0.0093460033 0.0039183697 -0.0043076684 -0.0045246483 -0.0063786596 0.0003462191 -0.0055534123 0.0015904162 0.0039282092 -0.0092898085 0.0013599470 0.0063291761 0.0039036899 0.0007241156 -0.0023272407 0.0115421877 -0.0022738971 -0.0074465913 -0.0061824469 -0.0029980660 0.0031958855 0.0034437839 -0.0041582999 -0.0045250215 0.0049650041 -0.0046374206 -0.0035252808 -0.0144224611 0.0063435235 0.0146095837 0.0149325609 -0.0065739436 -0.0145029426 -0.0104279650 0.0126645874 0.0195270639 0.0041894735 0.0068949350 -0.0010113968 -0.0112997999 -0.0042793165 0.0042117590 -0.0075541379 0.0030782627 0.0037071892 -0.0037732167 -0.0041131413 0.0011357327 0.0096813936 -0.0011805890 -0.0043396627 0.0054083701 0.0002159163 -0.0022862878 0.0074238839 -0.0064833617 -0.0039566676 -0.0037055827 0.0156263454 0.0043058896 -0.0061021230 0.0104074656 0.0024871235 0.0064243405 0.0016447078 -0.0024726004 0.0123787828 0.0106624367 -0.0034498010 -0.0017065890 0.0009966392 0.0005527459 0.0013121254 -0.0230940566 -0.0039606373 0.0475017316 -0.0072497590 -0.0808558458 0.0001523716 -0.0143120539 -0.0074812610 0.0052935429 0.0190897099 0.0106013578 -0.0051272564 -0.0048784919 -0.0011296683 -0.0002303670 -0.0001887098 -0.0000085333 0.0003349842 0.0002909714 -0.0000409529 0.0004179644 -0.0000231494 0.0000143241 0.0003235854 0.0001688201 0.0000333777 0.0003739158 -0.0020553437 -0.0015294007 0.0006285352 0.0000230697 -0.0002266577 -0.0012584374 -0.0013149146 0.0002837513 0.0004774091 -0.0012544658 0.0012770327 0.0002368554 -0.0002918083 -0.0004152681 0.0001713231 -0.0001647824 -0.0005791540 -0.0003585762 0.0019505147 -0.0014681186 -0.0008282746 0.0003447293 0.0002322670 -0.0002724208 -0.0004062575 -0.0000433670 -0.0000890049 0.0007503104 0.0006628961 -0.0004377351 -0.0003840001 -0.0003600023 0.0023093169 0.0022332651 0.0027043198 0.0006004348 -0.0024612019 -0.0013837092 0.0008874749 0.0037794056 -0.0002249983 0.0002201681 0.0140804289 0.0175440780 -0.0127743349 -0.0033341337 -0.0110376229 0.0005386945 0.0109002444 0.0129760188 -0.0107244991 -0.0173217005 -0.0250308603 0.0149722414 0.0069754534 0.0143780132 0.0023107172 -0.0110980237 -0.0114694183 0.0216193316 -0.0076240802 0.0034619754 0.0157871364 -0.0005590441 0.0055546222 -0.0037867749 -0.0082744508 -0.0148305341 -0.0201228674 0.0085658063 0.0026644586 -0.0210679308 0.0088765569 0.0010281024 -0.0596142724 -0.0147824125 0.0493474415 0.0004388228 -0.0250131455 -0.0954312575 -0.0554201090 0.0165770868 0.1468803268 0.0510570141 0.0051055729 -0.0679723209 0.0136392909 0.0300100395 0.0728896742 0.1062399946 0.0456890832 0.0224781371 0.0902447108 0.0416355145 0.0130454799 -0.0316158459 0.0262463711 0.0561440081 -0.0495263270 -0.0387465519 -0.0546233972 -0.0756930808 -0.0593685463 -0.0464098501 -0.0029913589 0.0054320671 0.0076917179 0.0070249181 0.0027300468 0.0068443630 -0.0019018263 -0.0228586827 -0.0376340720 0.0335134448 -0.0019611985 -0.0205201364 0.0132311313 0.0537018130 -0.0232464811 0.0077347611 -0.0514539647 0.0197384050 0.0196903821 -0.0324822716 0.0095323281 -0.0250714440 0.0579483285 -0.0181675820 -0.0249342413 -0.0328977736 0.0176050372 0.0336140177 -0.0539266336 0.0150323566 0.0186159560 0.0263276509 -0.0134918076 -0.0261432218 -0.0513081895 0.0237933596 -0.0104446115 0.0345192180 -0.0092788814 0.0373627438 0.0394378790 -0.0202532589 -0.0564450722 -0.2519525929 0.1292360297 0.0357938754 0.2312334100 -0.1487045684 -0.0276708310 0.0995035986 -0.1240097255 0.0237411173 -0.1916569079 0.1875881606 0.0886368053 0.1694955591 0.0103857158 -0.0713081682 0.1285683781 -0.2025204487 -0.0970656914 -0.1590392261 -0.0175928616 0.1245520731 0.2692739560 -0.0230003927 0.0583393485 -0.1101040079 0.1813004202 -0.1328566277 -0.2593461283 -0.0007446935 -0.0002769124 0.0015307009 -0.0001800725 0.0092944693 0.0049806189 -0.0039167847 -0.0018012447 -0.0025088357 0.0039132043 0.0041508641 0.0048030016 0.0021966120 -0.0002938506 0.0011057107 -0.0006467652 -0.0015740243 0.0046949443 0.0026885265 0.0040606675 0.0040688583 0.0069306122 -0.0133879878 -0.0003262475 0.0048124127 0.0076395742 0.0235157009 -0.0032399734 0.0078955622 -0.0125593658 0.0098889095 -0.0053268429 -0.0123112117 0.0042465288 -0.0150673817 0.0157398605 -0.0079261562 0.0163802298 -0.0218832443 0.0077672067 -0.0123780422 -0.0200078167 0.0014085671 0.0122923754 0.0149304745 0.0027407917 0.0002518748 -0.0075278741 0.0076163937 0.0007126905 0.0123074910 -0.0134988506 -0.0070656995 -0.0121428052 -0.0005217385 0.0001254743 0.0011020000 0.0000094361 -0.0035015936 -0.0007260530 -0.0001866590 0.0012237573 -0.0002157449 0.0018705612 0.0000911519 0.0005487367 -0.0006641710 -0.0022590023 -0.0012897674 -0.0025530448 -0.2312026455 0.2311211593 0.2679393310 0.0855012766 0.1185412263 -0.0089482369 -0.0988993286 -0.0440593805 0.0451800528 0.0314879341 0.0622722621 0.0053698246 0.0559619188 -0.0116477935 -0.0375021694 0.0977146176 -0.0116084590 -0.0650044483 -0.0371622760 -0.0096440573 0.0201874011 -0.1040630453 0.0228721949 0.0672979305 0.0608315245 0.0375253667 -0.0319369371 -0.0759987335 0.0654166924 0.0703070842 -0.0437491733 0.0503361602 0.0465598168 0.1537134237 -0.0683819784 -0.1556683019 -0.1479053838 0.0697138062 0.1482589629 0.0877950449 -0.1088756224 -0.1845983495 -0.0888124661 -0.0970107286 0.0262047011 0.1669193037 0.0758580127 -0.0604407958 0.1122129037 -0.0300864532 -0.0525167894 0.0587503508 0.0724195239 -0.0159342909 -0.1335435271 0.0048956098 0.0590869807 -0.0792115185 -0.0315260387 0.0289547357 -0.0974089061 0.1068428066 0.0564905861 0.0573242036 -0.1974486431 -0.0635605829 0.0713231312 -0.1484156238 -0.0436136929 -0.0911034515 0.0149172714 0.0411772290 -0.1881541618 -0.1464349980 0.0567908824 0.0155530775 -0.0109161516 -0.0054048137 -0.0115819465 0.2299953859 0.0417291195 -0.0061401762 0.0003979072 0.0175500285 0.0004590384 0.1441606190 0.0734701173 -0.0572825625 -0.1914235056 -0.1051484588 0.0537212768 0.0503848250 0.0116701285 0.0015764695 0.0015937877 -0.0002609188 -0.0017363783 -0.0007768473 -0.0001151514 -0.0022821383 -0.0006973994 0.0006679994 -0.0027824640 -0.0015850550 -0.0001794509 -0.0029777827 0.0207497315 0.0151033198 -0.0060977844 -0.0013279101 0.0015084271 -0.0094056869 -0.0050899923 0.0021116509 -0.0100566482 0.0162627602 0.0024804042 0.0052027809 -0.0094480356 -0.0025459961 -0.0049151769 -0.0026576469 -0.0073107754 0.0021203413 -0.0095353196 0.0211538660 -0.0092084424 0.0029367681 -0.0029865137 0.0008825754 0.0025233284 0.0021134598 0.0013758464 -0.0077610021 -0.0078622906 0.0013756013 0.0045489365 0.0033181692 -0.0240556031 -0.0201651195 -0.0231477614 -0.0043718220 0.0282842932 0.0155992943 -0.0113150582 -0.0339775645 0.0033180900 -0.0161889692 -0.0530185750 -0.0641996575 0.0285011100 0.0208508393 0.0387263521 0.0171495032 -0.0490279595 -0.0502820332 0.0242738769 0.0615035895 0.0836361556 -0.0334719334 -0.0257315167 -0.0443751012 -0.0168748199 0.0455311407 0.0407951440 -0.0670105038 0.0321786030 0.0040562449 -0.0703272786 0.0218830472 -0.0007526850 0.0133915822 0.0342592289 0.0603943600 0.0489553986 -0.0306060271 -0.0184755944 0.0689587274 -0.0397924288 -0.0025065981 0.0062201004 0.0009679012 -0.0084429004 0.0014792319 0.0041920133 0.0124112105 0.0063180006 -0.0016272680 -0.0161060412 -0.0078650230 -0.0011989002 0.0080821777 -0.0003738917 -0.0032774654 -0.0115326125 -0.0095081424 -0.0080844992 -0.0053661036 -0.0125917428 -0.0028346746 -0.0047141811 0.0108050801 -0.0087510839 -0.0207829387 0.0101909175 0.0049198713 0.0050827896 0.0123182262 0.0056103251 0.0033808390 0.0118781939 -0.0221883609 -0.0315843438 -0.0255196952 -0.0103432897 -0.0259177709 -0.0001620160 0.0067769742 0.0115120841 -0.0094180997 0.0008700602 0.0066914452 -0.0001747096 0.0295226180 -0.0125291612 0.0005884127 -0.0286448761 0.0120443062 0.0079624474 -0.0137634959 0.0041054651 -0.0086433920 0.0242637278 -0.0078686779 -0.0131526007 -0.0135075086 0.0074712873 0.0140831435 -0.0185978059 0.0047485823 0.0136348073 0.0133273567 -0.0075984546 -0.0155196869 -0.0244545379 0.0119043261 -0.0160380222 0.0189536996 -0.0035717718 0.0171556647 0.0232452557 -0.0112451077 -0.0056834089 -0.0227808097 0.0106217566 0.0056854501 0.0230626711 -0.0115002170 -0.0045534138 0.0086435861 -0.0142392079 0.0039711456 -0.0172712748 0.0198211828 0.0101577056 0.0170777638 0.0027769407 -0.0055258348 0.0162030575 -0.0203715965 -0.0064169066 -0.0120103595 0.0001223888 0.0083412720 0.0207089052 -0.0036881749 0.0041781659 -0.0086785701 0.0136242010 -0.0100964126 -0.0169218236 -0.0024224699 -0.0004265151 -0.0144131688 0.0006510885 -0.0667305200 -0.0692306373 0.0508041822 0.0255103221 0.0407241106 -0.0271568299 -0.0373058610 -0.0613571094 -0.0325662316 0.0017923288 -0.0105727311 0.0008014678 0.0097011648 -0.0728885373 -0.0364895122 -0.0558420215 -0.0053958503 -0.0437677457 0.1488650492 -0.0333519959 -0.0004806309 -0.0112773885 0.0673782033 -0.0026246235 -0.0336689245 -0.0179959179 0.0333680300 0.0263800496 -0.0303798612 0.0052505775 -0.0450362005 0.0613665463 -0.0278522126 0.0483578651 -0.0763611869 0.0261163462 0.0095549184 0.0180006340 0.0000548968 -0.0046875454 -0.0241950062 0.0069528547 0.0125736812 0.0049890366 0.0120372933 -0.0114174805 -0.0077883195 -0.0047890781 -0.0190744092 -0.0056100073 -0.0163347643 -0.0003942724 -0.0016638045 -0.0002077289 -0.0045834383 0.0031487540 -0.0001815806 -0.0004122859 -0.0001016001 0.0008036027 0.0009895485 0.0002355334 -0.0006579142 0.0009858618 0.0011514119 -0.0007350226 0.0932631597 -0.0925140106 -0.1031529304 -0.0380644435 -0.0516088455 0.0044287055 0.0438212490 0.0205051398 -0.0196837055 -0.0158008091 -0.0283180079 -0.0013085030 -0.0244811890 0.0034135982 0.0158197073 -0.0427227489 0.0043769869 0.0281471925 0.0167165340 0.0058399435 -0.0085612752 0.0450298988 -0.0095829972 -0.0289831249 -0.0268012332 -0.0155462091 0.0142141759 0.0322677201 -0.0290407566 -0.0302418316 0.0198716176 -0.0226710774 -0.0206232783 -0.0625257362 0.0278780423 0.0633958746 0.0600291493 -0.0276824517 -0.0612874077 -0.0327163924 0.0423039158 0.0785718696 0.0339872661 0.0414792620 -0.0092787006 -0.0648226387 -0.0342650153 0.0228734166 -0.0394988043 0.0060789712 0.0179449080 -0.0224582025 -0.0337134723 0.0047479618 0.0478202636 0.0043060761 -0.0216596550 0.0299867472 0.0214356763 -0.0094907385 0.0314164657 -0.0411248668 -0.0188942801 -0.0178922691 0.0639799996 0.0307022567 -0.0146175053 0.0532123313 0.0310098442 0.0335645121 -0.0167004442 -0.0166997032 0.0780073041 0.0546769466 -0.0251769036 -0.0067054148 0.0052419178 0.0022481563 0.0062289359 -0.0993054390 -0.0162889472 0.0092116245 0.0003867513 -0.0175199050 -0.0003180364 -0.0684415631 -0.0347128885 0.0284245275 0.0916767211 0.0498686227 -0.0263900024 -0.0246414634 -0.0056531858 -0.0008519047 -0.0004375725 0.0002598662 0.0009388611 0.0003249272 -0.0000469998 -0.0011224536 0.0001407488 -0.0017114014 0.0010440115 0.0003414523 0.0003732593 0.0011476898 -0.0100110081 -0.0071181069 0.0027456049 0.0007712682 -0.0006880573 0.0041766594 0.0007290773 -0.0004710011 0.0045024466 -0.0073272929 -0.0006031486 -0.0023267731 0.0041843989 0.0009703551 0.0191643482 0.0144640812 0.0216915560 -0.0034894126 0.0100354598 -0.0168445926 0.0182488769 -0.0150110305 0.0070271376 0.0036286412 0.0015125984 -0.0055882460 -0.0024059608 0.0067638772 0.0030622958 0.0019731763 -0.0052429303 -0.0021757934 0.0137668747 0.0103416795 0.0123054340 0.0019122750 -0.0149358940 -0.0074928912 0.0063792607 0.0176839797 -0.0023148816 -0.0576487200 -0.1851855681 -0.2265419607 0.1154479387 0.0683460701 0.1388750540 0.0448087575 -0.1648944833 -0.1751736782 0.0950729957 0.2197928855 0.3019181856 -0.1361398535 -0.0894077356 -0.1631338775 -0.0477922837 0.1536639363 0.1422635338 -0.2350340898 0.1118531045 0.0074794961 -0.2386989044 0.0588435011 -0.0159681585 0.0534086446 0.1013508243 0.1835860272 0.1948129069 -0.1102797690 -0.0542581468 0.2414769743 -0.1321477387 -0.0015497096 -0.0071764138 -0.0008512078 0.0098431920 -0.0026329574 -0.0059815919 -0.0172808048 -0.0074976018 0.0030978306 0.0230649949 0.0069552331 0.0000994412 -0.0107858267 0.0025847545 0.0052010191 0.0138909293 0.0137151653 0.0086510557 0.0065657571 0.0164057318 0.0071425691 0.0066896968 -0.0077321540 0.0069342147 0.0155305838 -0.0076013851 -0.0057138099 -0.0089441635 -0.0138282456 -0.0086566875 -0.0069638021 0.0351140222 -0.0666190145 -0.0943624596 -0.0876598774 -0.0339395085 -0.0842329290 -0.0001975367 -0.0056302155 -0.0095059192 0.0074196227 -0.0005978031 -0.0050304589 -0.0148571596 0.0738563691 -0.0300500934 0.0018607505 -0.0689915152 0.0294386019 0.0078872933 -0.0253623574 0.0086491380 -0.0071617456 0.0455073917 -0.0162127175 -0.0232998877 -0.0247440144 0.0134228881 0.0296403586 -0.0211672085 0.0030935193 0.0435401037 0.0328282865 -0.0205014390 -0.0462180698 -0.0582506447 0.0299882012 -0.0535023456 0.0496187726 -0.0077659645 0.0401400228 0.0706640592 -0.0322657899 0.0005845709 0.0041334842 -0.0034216511 -0.0061234843 -0.0064573810 -0.0031142355 0.0037465608 -0.0008372687 0.0066088916 -0.0030729080 0.0015353456 -0.0061594183 -0.0071501384 -0.0058453447 -0.0060154905 -0.0008095417 -0.0089044086 0.0057275073 -0.0024700507 -0.0023613354 -0.0018530188 0.0035040359 0.0034876297 0.0025656159 0.0000949285 -0.0016254059 0.0020313343 -0.0020610130 -0.0081723411 0.0035898138 0.0003473509 0.0069566129 -0.0005167790 0.0314136411 0.0318132558 -0.0232322891 -0.0119477436 -0.0199342336 0.0140751906 0.0160723468 0.0285514032 0.0151629282 -0.0010125357 0.0049808617 -0.0006239760 -0.0024353593 0.0346327662 0.0157759814 0.0277016483 0.0039236203 0.0241366469 -0.0710361679 0.0142158214 0.0025075340 -0.0279668325 -0.0083557297 0.0042433959 -0.0437738714 0.0166953922 -0.0009103351 0.0320165127 0.0075009918 -0.0060456365 0.0069279303 0.0222992625 -0.0056189355 0.0037961853 -0.0062765090 0.0002849864 0.0950223392 0.1352861386 0.0113423693 -0.0827517660 -0.1172981121 -0.0199226598 0.0682252147 0.0530711162 0.0382573494 -0.0660416068 -0.0773500263 0.0229243489 -0.0848450391 0.0167438565 -0.0821288091 -0.0073010313 -0.0060547613 -0.0050616297 0.0006525559 0.0018799911 -0.0003206134 -0.0013811013 0.0000308421 0.0000396136 0.0012764337 0.0003265422 -0.0006599731 0.0008542936 -0.0004258495 0.0006874782 -0.0335824458 0.0292832514 0.0384167184 0.0085927453 0.0147985746 -0.0032459814 -0.0066484882 -0.0021185955 0.0034184556 -0.0044654881 0.0022324822 0.0041440312 0.0031356624 -0.0021010863 -0.0025188073 0.0074417781 -0.0012801861 -0.0049550644 -0.0013128344 0.0007532594 0.0008207539 -0.0022233885 0.0026062991 0.0020743710 0.0031892221 0.0075067644 0.0001393075 -0.0181530182 0.0101998628 0.0124099413 -0.0003218211 0.0024639966 0.0051830550 0.0146197570 -0.0074263528 -0.0149418160 -0.0068170227 0.0077188698 0.0103873672 -0.0073664383 0.0087575549 -0.0048780034 -0.0430324838 -0.0297984401 0.0143938200 0.0548123890 0.0313531340 -0.0189346380 0.0367099236 -0.0015532191 -0.0158055226 0.0205548542 0.0313343035 -0.0045932823 -0.0388567334 -0.0052259901 0.0163527132 -0.0255375505 -0.0248617404 0.0070263946 -0.0246941815 0.0402515806 0.0167123144 0.0208726831 -0.0558065106 -0.0194811479 0.0143314707 -0.0466816007 -0.0127853660 -0.0278917114 0.0241097949 0.0156971471 -0.0648594597 -0.0424537422 0.0214775593 0.0001300471 -0.0007549802 -0.0002593895 0.0013491310 0.0106057247 0.0025136646 0.1296330093 -0.0016994498 -0.2764263523 0.0004218147 0.0117804909 0.0055244584 -0.0052412838 -0.0150301640 -0.0080922699 0.0044916411 0.0042200778 0.0009658549 0.0000989713 -0.0001066428 -0.0000017351 -0.0002243584 0.0005265640 -0.0000143130 0.0001752089 -0.0000444404 -0.0000052622 -0.0002102204 0.0000301058 -0.0000465250 -0.0001110643 0.0016873393 0.0011839852 -0.0004796359 -0.0003574992 -0.0000749283 -0.0011093527 -0.0032218649 0.0015670951 -0.0005166254 0.0007393474 0.0004915493 0.0009636855 -0.0027977128 -0.0015576784 -0.0014637249 -0.0012897303 -0.0032261587 0.0003510765 0.0007545493 0.0043286125 -0.0052596973 0.0010622031 0.0001972171 -0.0003767807 0.0000003315 0.0006717475 0.0003351154 -0.0009866912 -0.0005145772 -0.0001194321 0.0003267096 0.0001465514 -0.0016956710 -0.0010334537 -0.0006758504 0.0000187926 0.0028180581 0.0015763461 -0.0012517098 -0.0015789983 0.0002911739 0.0032434394 0.0077034140 0.0086317344 0.0049839923 -0.0057058186 -0.0037036517 -0.0105455704 0.0116515158 0.0089378189 0.0019755122 -0.0098340649 -0.0110884443 -0.0049228987 0.0051935208 0.0037982562 0.0089971801 -0.0104367518 -0.0065122940 0.0002730801 -0.0055555714 -0.0082530606 0.0142655031 -0.0099123041 -0.0065984046 -0.0009615784 -0.0036329578 -0.0061109064 0.0021996160 0.0055738252 0.0077068123 -0.0109517719 0.0114979697 0.0041624493 -0.1461043577 -0.0347629828 0.1440551882 -0.0018510340 -0.0662790442 -0.2371575664 -0.1455387908 0.0361600617 0.3597925840 0.1591916618 0.0261902698 -0.1693202366 0.0055834055 0.0574054464 0.1946044195 0.2226721894 0.1353534481 0.0771450901 0.2210176906 0.1084349928 0.0384113752 -0.0924797772 0.0748280638 0.1653751295 -0.1698021510 -0.1088502387 -0.1171101786 -0.2112014656 -0.1228387126 -0.0699677846 -0.0014303021 0.0026939455 0.0037078594 0.0024091003 0.0009667371 0.0022803233 -0.0038287905 -0.0629180494 -0.1050088803 0.0940143972 -0.0061890706 -0.0594039375 -0.0101359124 -0.0162030948 0.0077719354 -0.0020024601 0.0166101525 -0.0065015282 -0.0117954081 0.0133632917 -0.0033314593 0.0137244397 -0.0226495274 0.0064496996 0.0134361139 0.0132267939 -0.0076768171 -0.0109415003 0.0258077704 -0.0080404765 -0.0013642964 -0.0070790124 0.0030771604 0.0037754694 0.0148778997 -0.0062395550 0.0005605858 -0.0089742891 0.0016004718 -0.0101744788 -0.0038406009 0.0030412522 0.0224784393 0.0887637337 -0.0424983138 -0.0455334876 -0.1090025102 0.0264558785 0.0430763238 -0.0296525387 0.0933796900 -0.0363555763 0.0672470828 -0.1103300745 -0.0704069683 -0.0910263122 -0.0419144898 0.0120661807 -0.1167748775 0.1044097576 -0.0049526805 0.0185308985 -0.0229908194 0.0012350706 -0.0391217233 0.0333238011 0.0017134972 0.0204735646 -0.0158939030 0.0206571505 -0.0056287811 0.0368417705 -0.0009195889 -0.0008189665 -0.0003522442 0.0025077567 -0.0119436143 0.0080632410 0.0042935259 0.0076474927 0.0019709765 -0.0022159291 -0.0092472227 -0.0059644212 -0.0001236561 -0.0008351229 -0.0016232347 -0.0008292992 -0.0117156484 -0.0052201948 -0.0079988174 0.0090233134 0.0040231056 0.0154542528 -0.0124856129 0.0128318695 -0.0053637140 -0.0004847955 0.0005388233 -0.0071122625 0.0019952147 -0.0001486918 0.0064497057 0.0004861708 -0.0008457413 -0.0039691905 0.0002402990 -0.0001862251 0.0020759684 -0.0026022502 0.0010841458 -0.0066550080 -0.0079747675 -0.0020458183 0.0056404576 0.0069964544 0.0018730061 -0.0046132420 -0.0035097615 -0.0025050489 0.0047848004 0.0049996845 -0.0016629111 0.0063700188 -0.0012591258 0.0055122096 0.0014040094 -0.0002346509 0.0011669735 0.0009501183 0.0009948357 0.0003115110 -0.0008783995 0.0003694490 -0.0020010137 -0.0001968727 -0.0005041864 0.0009195493 0.0022288989 0.0006620506 0.0024955730 0.0610787419 -0.1002749043 -0.0832721438 -0.0795426256 -0.0874894388 0.0163688830 0.0793226263 0.0500970040 -0.0311364788 -0.0446303195 -0.0610360003 0.0056143661 -0.0417829987 -0.0207227406 0.0180012617 -0.0674053534 -0.0051976406 0.0400975464 0.0304795279 0.0329336360 -0.0072853899 0.0791436667 0.0026055518 -0.0452648661 -0.0485901898 0.0076298091 0.0362797543 0.0433312629 -0.0567337187 -0.0468083332 0.0369693869 -0.0620116031 -0.0484092232 -0.0984244493 0.0336755113 0.0974574170 0.1491851653 -0.0277549999 -0.1194564606 -0.1835845200 0.2320681092 0.1981703652 -0.2398048229 -0.1333244347 0.0829910930 0.2373244297 0.1690766143 -0.0773081291 0.1490299695 0.0387919178 -0.0569398521 0.0921229930 0.1860631200 -0.0137327503 -0.1410514413 -0.0607667847 0.0532097095 -0.1068293044 -0.1816695380 0.0175665858 -0.0616036705 0.1917142442 0.0553454562 0.0964676914 -0.2396777365 -0.0794887290 0.0160488285 -0.1954663457 -0.0331439424 -0.1093226055 0.1969664600 0.0770048617 -0.2998625277 -0.1559566328 0.1072631878 -0.0127830978 0.0051910040 0.0033611268 0.0136400436 -0.1558093012 -0.0237767305 -0.0130720539 -0.0003073950 0.0254241098 -0.0011651852 -0.0769489107 -0.0401422477 0.0290038259 0.1049938983 0.0591636313 -0.0298453112 -0.0279109409 -0.0064418990 -0.0002861999 -0.0005217230 -0.0001711864 0.0006940693 0.0001434157 0.0001650971 0.0014763370 -0.0000848570 -0.0002789720 0.0013035373 0.0006933425 0.0003001549 0.0030661529 -0.0123812620 -0.0095137493 0.0028828090 0.0013466186 -0.0008029999 0.0058089967 0.0041472169 -0.0017708322 0.0050977506 -0.0084951669 -0.0013986162 -0.0017567696 0.0052454064 0.0021661996 0.0023985175 -0.0001722516 0.0001787726 -0.0011836722 0.0083195856 -0.0054333758 -0.0040230432 0.0008901535 0.0013683578 -0.0003062412 -0.0013240396 -0.0013633560 -0.0006086281 0.0036810839 0.0033433041 -0.0007351800 -0.0016677533 -0.0012300295 0.0150944413 0.0112235932 0.0138118278 0.0029853515 -0.0145101362 -0.0064606102 0.0058405174 0.0189865437 -0.0018120007 -0.0005842034 0.0020722868 0.0017376156 0.0028465128 -0.0017666516 -0.0005674783 -0.0040138632 0.0036430161 0.0023182608 0.0004226182 -0.0021809525 -0.0024421597 -0.0030498838 0.0016033224 0.0004900172 0.0036236636 -0.0032446813 -0.0017547882 0.0001451523 -0.0018963336 -0.0016947937 0.0048878715 -0.0058017665 -0.0023534658 0.0052920762 -0.0016062159 -0.0009186315 0.0034355979 0.0013754757 0.0036553919 -0.0033151825 0.0039286951 0.0023680874 0.0163897921 0.0046842633 -0.0133307100 -0.0020699720 0.0049915742 0.0216353330 0.0158656961 -0.0031319240 -0.0360298356 -0.0176470496 -0.0036113890 0.0167632833 0.0011263184 -0.0042446139 -0.0171030364 -0.0232477582 -0.0132113354 -0.0058707273 -0.0200864841 -0.0113688270 -0.0002230523 0.0040959236 -0.0031444058 -0.0059805093 0.0177011594 0.0117204129 0.0108484890 0.0193729241 0.0114134030 0.0047905499 -0.0016902420 0.0017649252 0.0022425819 -0.0022217380 -0.0004753006 -0.0012009683 0.0006460172 0.0031114657 0.0050224126 -0.0054333971 0.0001468438 0.0028374901 -0.0015900241 0.0008169817 -0.0000741301 0.0008238020 -0.0000446280 -0.0000648511 -0.0029268090 0.0012080285 -0.0000043333 0.0028020269 -0.0018179280 0.0002297297 0.0026922772 0.0010227762 -0.0008158552 -0.0000497316 0.0042689405 -0.0016373693 0.0027986921 0.0005409762 -0.0007251005 -0.0026283181 -0.0009423653 0.0008191943 -0.0029371483 0.0014790798 0.0001418657 0.0004426369 0.0041191638 -0.0016046156 -0.0010785579 -0.0049990724 0.0027068799 0.0025035900 0.0065786827 -0.0018563972 -0.0033172211 0.0015537494 -0.0066432794 0.0027072975 -0.0041047609 0.0074975489 0.0048526418 0.0060181031 0.0033454308 -0.0004956339 0.0081962647 -0.0067542724 0.0012003214 -0.0004572899 0.0022072898 -0.0008425523 0.0014666016 -0.0024969737 -0.0009754467 -0.0011523621 -0.0002835131 -0.0009752749 0.0018106195 -0.0029042094 0.0003879636 0.0083025782 -0.0007668833 0.0398690857 0.0304954253 -0.0213534743 -0.0123203659 -0.0209570265 0.0216690916 0.0151415376 0.0267905048 0.0146215561 -0.0002365153 0.0055074422 -0.0004768607 -0.0120490591 0.0368587894 0.0236660095 0.0229407774 0.0040690081 0.0163272220 -0.0772481267 0.0190460072 -0.0026555944 -0.2301302166 -0.0484458058 0.0367031368 -0.3051559737 0.1021058304 -0.0013292714 0.2709320259 0.0312194047 -0.0400707970 -0.1441223943 0.0648091290 -0.0185406798 0.1552384913 -0.0749966913 0.0220931868 0.0334760957 0.0308094036 0.0242118205 -0.0173757967 -0.0331731815 -0.0123369302 0.0550775649 0.0045303876 0.0715849916 -0.0489858259 -0.0010515993 -0.0677135187 -0.0814859728 -0.0517927502 -0.0601227829 -0.0042379419 -0.0015257863 -0.0034530985 -0.0139014176 0.0077440753 0.0013962966 -0.0036368964 -0.0032521138 -0.0036423116 0.0035768941 0.0022674996 -0.0009461268 0.0022175514 -0.0006990302 0.0050963068 -0.0138916442 0.0144885439 0.0145870164 0.0016822683 -0.0016171149 -0.0011210159 0.0006604317 -0.0016376718 -0.0009174639 -0.0032210381 0.0022671167 0.0031161594 -0.0001022817 0.0032551605 0.0013097045 -0.0028302635 0.0022232167 0.0025036518 0.0015384939 -0.0034227845 -0.0022016689 -0.0002519418 -0.0020231345 -0.0012124043 -0.0006921948 -0.0064162346 -0.0035810739 0.0063446074 -0.0013380750 -0.0041414775 0.0013264774 0.0069300243 0.0011587658 0.0084199820 -0.0029208747 -0.0081031665 -0.0087656625 0.0025600180 0.0076968293 0.0078530934 -0.0103185085 -0.0111468954 0.0057134972 0.0025674465 -0.0019485283 -0.0040396344 -0.0039250865 0.0011613008 -0.0020743468 -0.0022139293 0.0005159264 -0.0016383571 -0.0049631299 0.0000500077 0.0015286579 0.0022497764 -0.0002785098 0.0016642720 0.0054628272 0.0001282044 -0.0007802754 -0.0035611423 -0.0003151674 -0.0021759584 0.0046516713 0.0003934999 0.0007148724 0.0034726172 -0.0007286423 0.0014394904 -0.0061600081 -0.0015806538 0.0057300258 0.0018033438 -0.0022664938 0.0002638772 -0.0009746197 0.0003622270 0.0035598044 0.0315670266 -0.0087548153 -0.0166082582 -0.0027732567 0.0357743448 0.0001646065 0.0076705307 0.0038938959 -0.0040297780 -0.0105605212 -0.0054053462 0.0035226528 0.0030428882 0.0006056163 -0.0001594040 0.0001526882 0.0001817625 0.0003129589 0.0005601886 -0.0003708197 0.0001268657 -0.0014116664 0.0003595939 -0.0000893696 -0.0002905675 -0.0001664674 0.0001243523 0.0009758295 0.0005946113 -0.0002936465 -0.0000491197 0.0000969419 -0.0050522081 -0.0070550492 0.0032049089 -0.0020276384 0.0016998746 0.0043020889 0.0021160961 -0.0037346409 -0.0021197153 0.0059603655 0.0033205066 -0.0056956168 -0.0030583916 0.0119792566 0.0029893644 -0.0068246624 0.0024654319 -0.0006651624 0.0006165332 0.0005686102 0.0001788031 -0.0004732292 0.0005324221 -0.0002259989 -0.0000471178 0.0000635141 0.0000147153 -0.0017886326 -0.0009537579 -0.0012234123 -0.0001166380 0.0021081760 0.0011515186 -0.0009950709 -0.0018193230 0.0005223894 -0.0720183063 0.0593449435 0.0039720305 0.1992990647 -0.0612827357 0.0385689113 -0.1737357353 0.1117997191 0.0507667958 0.0940007455 -0.0392700946 -0.0106512890 -0.1878857460 0.0442913376 -0.0337051652 0.1640736743 -0.1169051371 -0.0428935205 -0.2049604359 -0.0226930250 -0.1640060278 0.1015575818 -0.1423922791 -0.1353731167 0.0218557019 -0.0120244406 -0.0103816516 0.1610257925 0.0387530412 0.1115517898 -0.0931852866 0.1653135451 0.1075287762 0.0431263186 0.0189639234 -0.0137929735 -0.0240807167 -0.0099950185 0.0038440200 0.0312504316 0.0057793532 -0.0291251707 -0.0514324418 -0.0201059559 0.0156298166 0.0258485598 0.0122432175 -0.0049835646 -0.0412944100 -0.0254846933 0.0073199553 -0.0101922063 0.0032571591 0.0290779768 0.0145432911 -0.0080154522 -0.0206296332 0.0538909368 0.0225461939 -0.0079416548 0.0153941028 -0.0043361955 -0.0286600001 -0.0075756047 0.0127792636 0.0173275783 -0.0104428036 -0.0030239785 -0.0081847192 -0.0000243129 0.0062277754 0.0105393486 -0.0137950502 0.0008668495 0.0089301026 -0.0485817254 -0.0042200904 0.0081883964 0.0091073441 0.0374263510 -0.0153207479 -0.1559699210 0.0724918495 -0.0033028378 0.1418761326 -0.1118569477 0.0194115310 0.1597504454 0.0619605846 -0.0491318697 -0.0144375820 0.2204008001 -0.0810953313 0.1293297860 0.0090346987 -0.0268908941 -0.1105721017 -0.0192138503 0.0268237206 -0.1288224687 0.0461207079 0.0101252873 0.0005401492 0.1687173600 -0.0620093691 -0.0044338387 -0.0215259268 0.0110002277 -0.0097602837 0.0088874134 -0.0198540407 0.0170817101 0.0080894717 0.0205176122 -0.0142441967 -0.0094911499 -0.0151325220 -0.0129891722 -0.0049023993 -0.0131612211 -0.0099158376 -0.0353862569 0.0113297123 -0.0327600183 -0.0329388379 -0.0231057128 0.0337454915 0.0468359018 0.0144775949 0.0243153574 -0.0131097232 0.0484398399 -0.0188901225 -0.0652030182 0.0227635038 0.0000615798 -0.0008581273 0.0001163640 -0.0042758562 -0.0026343518 0.0019337411 0.0011416439 0.0019362795 -0.0020609957 -0.0018120989 -0.0025544264 -0.0011521051 0.0003504182 -0.0007078697 0.0003354730 -0.0007582403 -0.0049506550 -0.0011633965 -0.0062049621 0.0013135181 -0.0044634212 0.0075831651 -0.0010902529 -0.0010043038 0.0353589684 0.0074144643 -0.0065511964 0.0417254337 -0.0120724821 0.0006495082 -0.0460743148 -0.0013991710 0.0053544313 0.0551783841 -0.0026568159 0.0062445092 -0.0410203881 0.0187424428 -0.0080009707 0.1411552033 0.1258092768 0.0853849354 -0.1281964619 -0.1126105783 -0.0798377767 0.1682604591 0.0262066005 0.2084371117 -0.1478401491 -0.0141964134 -0.1946951841 -0.2217761928 -0.1340879362 -0.1648703327 -0.0100013176 -0.0107121485 -0.0110645801 0.0025894215 -0.0031288474 -0.0009605541 -0.0042174555 0.0046548621 0.0002001042 0.0024085266 -0.0006703610 -0.0013375807 0.0021945850 -0.0021693727 0.0023196697 0.0086083468 -0.0065465649 -0.0087925960 -0.0071814721 0.0038599994 0.0065288216 -0.0021752494 0.0074597181 0.0040070561 0.0067556651 -0.0132099045 -0.0097329744 0.0038258159 -0.0169974728 -0.0080121988 0.0107957773 -0.0109487267 -0.0106703331 -0.0039484926 0.0209720705 0.0104268081 -0.0137873885 0.0115448094 0.0119926085 0.0024750299 0.0162295852 0.0021631922 -0.0121129965 -0.0030945779 0.0073270325 -0.0036155668 -0.0270581958 -0.0092085193 -0.0036907506 0.0034804463 0.0044362340 0.0019889014 -0.0011167465 -0.0021519310 -0.0025259783 0.0020290330 0.0035301704 0.0002000489 0.0018220794 -0.0000300777 -0.0007891206 -0.0014112605 0.0001419811 0.0003364779 -0.0012114524 -0.0002814015 0.0000096366 -0.0025015735 -0.0003483924 -0.0002303883 0.0013673017 0.0002766541 0.0001991019 0.0021375307 0.0002231505 -0.0015578236 -0.0002079393 0.0005114403 0.0001361285 0.0047963256 0.0008468713 0.0017192390 0.0003532022 -0.0008340622 -0.0000230007 -0.0023970525 -0.0003989198 0.0018135656 0.0000562711 -0.0007756722 0.0004513157 -0.0017770116 -0.0008428537 0.0087590178 0.0198909095 0.0002978744 -0.0705618408 -0.0311651382 0.0665758804 0.0000861237 -0.0038621243 -0.0020943440 0.0012025815 0.0051622477 0.0030681566 -0.0013788687 -0.0013337778 -0.0003533070 0.0000341649 0.0000215230 0.0000837245 0.0002017962 0.0003436948 0.0000998909 0.0001995124 0.0001311223 -0.0000685247 0.0000554394 0.0000602166 -0.0000459351 0.0002651176 -0.0006519735 -0.0005754072 0.0001562446 0.0001104834 0.0000098101 -0.0013730826 -0.0033180817 0.0016784708 -0.0001221029 0.0014361232 -0.0005910072 -0.0007841692 -0.0024381912 -0.0021859589 -0.0017986167 -0.0013853810 -0.0002162450 0.0006270620 -0.0015757555 0.0000678008 -0.0006825635 0.0010929808 -0.0005607145 -0.0002934317 -0.0002668150 0.0001322449 0.0001541261 -0.0001928297 0.0002231227 -0.0000486388 0.0000533109 -0.0000373081 0.0004312935 0.0003672877 0.0003563753 0.0001382019 -0.0005434399 -0.0002480419 0.0002031231 0.0006395739 0.0000795448 0.0366330919 -0.0207134163 0.0030377315 -0.0699262200 0.0186867561 -0.0164742085 0.0561009135 -0.0341924518 -0.0139017278 -0.0313606720 0.0098724082 -0.0004238295 0.0638781218 -0.0138481497 0.0130929556 -0.0560972588 0.0384271332 0.0136148133 0.0758590418 0.0056835607 0.0534272214 -0.0281502494 0.0444310348 0.0435233349 -0.0084473171 0.0020449508 -0.0001534051 -0.0542486964 -0.0116954324 -0.0361739549 0.0328467279 -0.0562363359 -0.0393541493 0.1667255694 0.0799320009 -0.0245642423 -0.1093636286 -0.0621141388 -0.0409643543 0.0997603036 0.0328528030 -0.0422268969 -0.1843862581 -0.0812470735 0.0267405437 0.1171122039 0.0720293083 0.0364440540 -0.1576814929 -0.0818042565 0.0574568300 0.0059172581 0.0394289773 0.1388188966 0.0414877298 -0.0136153650 -0.0444317302 0.1873700934 0.0693341410 -0.0619734049 0.0028576737 -0.0525646411 -0.1492298992 0.0019236431 -0.0030184214 -0.0039818677 0.0049775626 0.0016294786 0.0042520061 -0.0011831896 0.0100631857 0.0173111969 -0.0370926611 0.0019470579 0.0238292673 0.0003752354 -0.0179962346 0.0068531138 -0.0008003745 0.0102056400 -0.0052413421 0.0429681390 -0.0101589664 -0.0028959974 -0.0351228923 0.0141661434 0.0004305752 -0.0413039526 -0.0066487036 0.0083260813 -0.0067163370 -0.0506804704 0.0200274992 -0.0514644974 -0.0115287880 0.0142005714 0.0452407656 0.0240228068 -0.0170481893 0.0610030484 -0.0302880354 -0.0067532165 -0.0101662027 -0.0646639772 0.0253412451 -0.0067929875 -0.0148418572 -0.0020821506 -0.0234452098 -0.0246021459 -0.0088297888 0.0994814527 0.0101086862 0.1529698455 -0.0802296645 0.0208713462 -0.1433994450 -0.1125737958 -0.0988161824 -0.1068927174 -0.0276087047 -0.2114233866 0.1137318441 -0.1302925574 -0.1020425804 -0.1158060871 0.1191299319 0.1306116669 0.0792045011 0.1086540595 -0.0176062186 0.1760970324 -0.0441119677 -0.2261020220 0.1108348564 0.0001211693 0.0003149176 0.0000457828 0.0002212579 0.0028618643 -0.0019328317 -0.0010547251 -0.0016823866 -0.0001699998 0.0012733983 0.0023503982 0.0014726026 0.0001607612 0.0002866771 0.0005735756 -0.0013379930 0.0000508462 0.0016098164 -0.0007430691 -0.0008953734 -0.0030008356 -0.0025678517 0.0027195139 -0.0028336787 0.0458060007 -0.0002865581 -0.0037517430 0.0422335681 -0.0155269577 0.0006233217 -0.0383942282 -0.0048571282 0.0060643694 0.0194687152 -0.0077294897 0.0029019943 -0.0222072563 0.0122183803 -0.0041513444 0.0097587583 0.0072715411 0.0070795471 -0.0090481276 -0.0063278980 -0.0053960297 0.0086444268 0.0010445489 0.0108820388 -0.0095159184 -0.0014317662 -0.0122813635 -0.0108200811 -0.0072320488 -0.0073866025 -0.0017581628 0.0001581759 -0.0021563832 0.0015439972 -0.0015001949 -0.0003537872 -0.0001396702 -0.0011509349 0.0034940903 0.0012715875 0.0012175470 -0.0015323131 -0.0022797203 0.0045081777 -0.0046002868 -0.2110907501 0.1876918317 0.2324128861 0.0140915242 -0.1350352924 -0.0496988019 0.1005141684 -0.0374051936 -0.0747918519 -0.1500392887 0.1056609756 0.1432347757 -0.0801526354 0.1727067934 0.1057873805 -0.1926112413 0.1226769672 0.1631377333 0.0818438550 -0.2113120965 -0.1312294015 0.2156681281 -0.1431268430 -0.1737888607 -0.0736801728 -0.1990889344 -0.0046678165 0.2311897878 -0.0403433924 -0.1553516069 0.0801401519 0.3030438159 0.0653303536 0.0839284204 -0.0460565595 -0.0871549796 -0.0575605342 0.0268560676 0.0543663387 0.0602751337 -0.0608154465 -0.0761389614 0.0209674443 -0.0289665289 -0.0104080612 -0.0034434328 0.0145578728 0.0033553330 -0.0219207030 0.0212438811 0.0117319017 -0.0078500760 0.0384462379 0.0087964117 0.0168405758 -0.0240423445 -0.0104459420 0.0051104454 -0.0280109214 -0.0060938288 0.0351552686 -0.0134773421 -0.0152330987 -0.0118810067 -0.0868172200 -0.0122964840 -0.0361728332 0.0072628546 0.0177776678 0.0090346125 0.0293974573 0.0008949632 -0.0141243784 0.0105630486 0.0072481178 -0.0194634183 0.0374393368 0.0139662730 -0.0323589529 -0.3756874331 -0.0145194229 -0.0008168114 0.0012819201 0.0088189332 -0.0003318499 0.0567872347 0.0303364138 -0.0212222290 -0.0772577134 -0.0441271302 0.0224863357 0.0207388214 0.0048811041 -0.0002392130 0.0000790170 0.0000600766 -0.0002447147 -0.0000294228 -0.0000351580 0.0004974610 0.0002231813 -0.0003081655 -0.0007430971 -0.0003086272 -0.0002454062 -0.0027569080 0.0089107454 0.0074394650 -0.0021967651 -0.0012544379 0.0000022584 -0.0046837424 -0.0030086783 0.0011540010 -0.0033829154 0.0058865936 0.0010814808 0.0005022853 -0.0036158096 -0.0017945746 -0.0049677792 -0.0031845032 -0.0056089450 0.0021237184 -0.0011121362 0.0147439397 -0.0154405743 -0.0004803590 0.0020247085 -0.0006280353 0.0002440674 0.0012805484 0.0007005900 -0.0028539079 -0.0020567746 -0.0000977341 0.0011026995 0.0006309393 -0.0083689814 -0.0062884434 -0.0068201840 -0.0014147734 0.0100718354 0.0056494312 -0.0049623309 -0.0106821737 0.0010742466 -0.0351070943 0.0128642585 -0.0053868866 0.0355685171 -0.0065899430 0.0121242681 -0.0234467718 0.0125422650 0.0035843168 0.0146190986 -0.0018811904 0.0035506902 -0.0314850307 0.0058787252 -0.0079760743 0.0290266144 -0.0188169440 -0.0068796438 -0.0327610300 0.0048352584 -0.0254371976 0.0035595192 -0.0106173622 -0.0159952539 0.0025846702 0.0025566913 0.0052277817 0.0247282841 0.0045984241 0.0157421418 -0.0188649680 0.0283037093 0.0230321765 0.0043438577 0.0013949025 -0.0035436240 -0.0013989024 0.0006911856 0.0046784303 0.0051812193 -0.0001469002 -0.0085369600 -0.0056940374 -0.0015197952 0.0040320946 0.0010498408 -0.0006958676 -0.0045209502 -0.0055720363 -0.0042127106 -0.0012781492 -0.0057728981 -0.0005453204 0.0006006754 -0.0020835224 -0.0000755861 0.0018380929 0.0055050817 0.0039958138 0.0022450286 0.0051572052 0.0015702318 -0.0002708382 0.0007259195 -0.0009621081 -0.0014522325 -0.0027587533 -0.0013516877 -0.0033027873 0.0004710164 0.0000720051 -0.0000107541 0.0007218701 -0.0001666972 -0.0007853172 -0.0027667112 -0.0013888601 0.0009444645 0.0062105057 -0.0044274726 0.0004113630 0.0345816778 -0.0118225294 -0.0009379334 -0.0275202961 0.0185165176 -0.0025237446 -0.0358679289 -0.0083934397 0.0087608372 -0.0010501845 -0.0389325440 0.0148831815 -0.0309263250 -0.0028294402 0.0067614795 0.0246176754 0.0075313072 -0.0072085861 0.0329800382 -0.0120044058 -0.0032258058 -0.0012998465 -0.0356480241 0.0132596882 -0.0024726410 -0.0008670952 -0.0034914001 0.0018014473 -0.0014271102 0.0041667963 0.0102371536 0.0008808641 0.0159018748 -0.0077059425 0.0032580143 -0.0147574990 -0.0116444370 -0.0105341567 -0.0113791841 -0.0023158741 -0.0200108605 0.0112529253 -0.0125531896 -0.0085274174 -0.0122252392 0.0102829041 0.0102647260 0.0076542504 0.0115542903 0.0002273046 0.0168095937 -0.0026786384 -0.0185436642 0.0104647625 0.0003417894 -0.0054731184 0.0007211565 -0.0270013278 -0.0247803472 0.0187453653 0.0093306080 0.0139199293 -0.0121418480 -0.0164408380 -0.0242362311 -0.0125819425 0.0008299368 -0.0041761367 0.0002138118 0.0044881835 -0.0275606041 -0.0144116608 -0.0266531734 0.0015322866 -0.0166642356 0.0534547763 -0.0116777834 0.0008421035 -0.0087104069 0.0005677900 0.0011386896 -0.0078933533 0.0031431879 0.0006035592 0.0073187881 0.0008391889 -0.0012149211 -0.0035101138 0.0019219443 -0.0006150774 0.0049777069 -0.0021754791 0.0005907074 0.0019510194 0.0015306951 0.0015893310 -0.0010557710 -0.0015257118 -0.0005892110 0.0021972668 0.0003279570 0.0025117087 -0.0031649845 -0.0011462605 -0.0027248171 -0.0034099892 -0.0015990932 -0.0022357332 -0.0006237459 0.0002225168 -0.0005511716 -0.0009466790 -0.0000211637 -0.0001237995 0.0002598280 -0.0004245490 0.0009297851 0.0003455242 0.0004118353 -0.0006064601 -0.0010557062 -0.0003930144 -0.0010489698 -0.0115178221 -0.0034350938 0.0093061635 0.0351043617 0.0452614781 -0.0053637685 -0.0455930580 -0.0255164593 0.0191108160 0.0545482872 0.0176808312 -0.0304813794 0.0255799255 0.0099596697 -0.0118642231 0.0456419355 -0.0065881488 -0.0306853761 -0.0232121817 0.0015739237 0.0155773456 -0.0621304956 -0.0065107547 0.0342566555 0.0292764777 -0.0113918357 -0.0243674707 -0.0346021543 0.0280180806 0.0310542955 -0.0259635934 -0.0160227650 0.0109646170 -0.0053906781 -0.0030345178 -0.0001376228 -0.0212247263 0.0365623335 0.0281658917 0.0408413963 -0.0042975908 -0.0559363828 0.1043490290 -0.1806037186 -0.0728145893 -0.0669386233 0.1124469717 0.0435452343 -0.2051292581 0.2104133841 0.1163715697 -0.0609955636 0.2935299255 0.0693737681 0.1840428783 -0.2032435730 -0.1078737998 0.0628632066 -0.2686161993 -0.0652355625 0.3236475516 -0.1140978281 -0.1498634412 -0.0878771980 -0.3759694806 -0.0272045924 -0.2940084011 0.0909384182 0.1390706735 0.1002064156 0.2843501454 0.0010858987 -0.0603928700 0.1430911945 0.0490355961 0.0100030064 -0.0017015135 -0.0025945327 -0.0030324417 0.1044357792 0.0084348908 0.0054307720 0.0028823930 -0.0000567086 -0.0010888081 0.0113950409 -0.0002164985 -0.0048736816 -0.0120842647 -0.0086969924 0.0052234345 0.0038914916 0.0013920865 -0.0004587056 -0.0002166432 0.0002380633 0.0001584321 0.0002258428 -0.0001638963 0.0000257111 -0.0001426653 -0.0006261714 0.0000270620 0.0000846272 -0.0002522236 -0.0004540649 0.0015060170 0.0020550209 -0.0006657430 0.0000123804 -0.0000230454 -0.0014276836 -0.0017699307 0.0007912578 -0.0004726786 0.0009089163 0.0005172127 -0.0006203935 -0.0006488019 -0.0009181223 0.0041250182 0.0033582721 0.0041311629 -0.0006268662 0.0036150821 0.0017509010 -0.0008818962 -0.0035806192 0.0017183395 -0.0012049678 -0.0007698228 0.0010982248 0.0004567200 -0.0010315783 0.0002148761 -0.0005157324 0.0003402323 -0.0001153402 0.0041200106 -0.0038906172 -0.0046015829 0.0005708657 -0.0005679800 0.0043304026 -0.0023320306 -0.0021192163 0.0011981556 0.0052561011 -0.0084416015 -0.0062343923 -0.0033884820 0.0036379173 0.0022698351 0.0058848957 -0.0089389442 -0.0076120885 0.0001228869 0.0101617284 0.0123260545 0.0023456203 -0.0049363827 -0.0044881943 -0.0081342509 0.0094089234 0.0063314368 -0.0015919539 0.0034808651 0.0044651340 -0.0096732111 0.0049111251 0.0005718038 0.0001902055 -0.0080827599 -0.0138395640 0.0030383463 -0.0058530493 -0.0059168473 0.0126384028 -0.0109568397 -0.0053646105 -0.0075405472 -0.0035343104 0.0008005761 0.0046390066 0.0025359472 0.0012099000 -0.0041424762 -0.0009532519 0.0030005001 0.0068088919 0.0029292782 -0.0014183349 -0.0044673008 -0.0029914544 -0.0022172716 0.0086813178 0.0033923579 -0.0028926827 0.0003436285 -0.0006820492 -0.0057636998 0.0014688111 -0.0019703695 -0.0046346401 -0.0064832413 -0.0025601663 0.0015046443 0.0007620555 0.0018640611 0.0056397250 -0.0017033396 0.0041418115 0.0063061690 0.0022994373 0.0015341534 0.0041809353 -0.0001371173 0.0013696069 0.0024896436 -0.0009257732 0.0002045198 0.0009947003 0.0005663935 0.0001078493 -0.0002076410 -0.0014356688 0.0011138058 -0.0001573903 -0.0066530962 0.0023466240 0.0001558914 0.0052862517 -0.0036349495 0.0005214175 0.0070638016 0.0016833873 -0.0017491887 0.0001128351 0.0076118364 -0.0028793093 0.0060214985 0.0004481135 -0.0012673902 -0.0047258909 -0.0013525809 0.0013454267 -0.0063747977 0.0021247194 0.0006152536 0.0001307119 0.0067247541 -0.0024738573 -0.0005624396 -0.0006449704 -0.0004048294 0.0001728004 0.0000013798 0.0003265835 0.0016058537 0.0002945340 0.0023443908 -0.0011832004 0.0002497316 -0.0020660617 -0.0015939721 -0.0012658587 -0.0015065957 -0.0004446763 -0.0030409628 0.0015531893 -0.0021689603 -0.0016058637 -0.0019984126 0.0018470077 0.0020547337 0.0012043776 0.0019482159 -0.0001085395 0.0029788081 -0.0005674560 -0.0032579391 0.0016815832 0.0000490893 -0.0018943532 0.0012876564 -0.0039345772 -0.0025425676 0.0022656183 0.0020220183 0.0050578529 -0.0049019442 -0.0040485472 -0.0074474691 -0.0026429642 0.0007092620 -0.0010782384 0.0012591615 0.0050249749 -0.0101685913 -0.0053355550 -0.0065545043 0.0014523435 -0.0036026317 0.0097587115 -0.0030392589 0.0016964545 -0.2063021494 0.0047447094 0.0157738314 -0.1647282934 0.0688139847 -0.0041149678 0.1542713017 0.0240960397 -0.0263512569 -0.0725648269 0.0321877997 -0.0114837641 0.0980159995 -0.0444829014 0.0145244992 -0.0187436296 -0.0171065199 -0.0097467402 0.0192614492 0.0109483762 0.0106564664 -0.0177129112 -0.0024652777 -0.0208125840 0.0289082207 0.0122079079 0.0265751307 0.0223797258 0.0123952510 0.0132450062 0.0000097685 0.0022104784 0.0007252147 -0.0119182789 0.0039246781 0.0006353965 0.0002237414 -0.0024490737 -0.0007336510 0.0008124408 0.0012846676 -0.0000667316 -0.0006574615 0.0017191739 -0.0004275660 -0.0550792821 0.0525327270 0.0624532350 -0.0080840843 -0.0331914734 -0.0054795808 0.0290503281 0.0028222213 -0.0168636785 -0.0413286829 0.0091773208 0.0317546334 -0.0198385641 0.0225132785 0.0192429934 -0.0426501174 0.0199374185 0.0335085701 0.0200893526 -0.0306496514 -0.0243382186 0.0505443345 -0.0217759362 -0.0363478218 -0.0197384123 -0.0269475419 0.0071047384 0.0447828663 -0.0148764582 -0.0324277985 0.0207203916 0.0513513191 0.0064658086 0.0236511917 -0.0093437762 -0.0230054480 -0.0169353904 0.0060039945 0.0153113182 0.0144789073 -0.0181619613 -0.0186573291 0.0041626354 -0.0010247752 -0.0013526319 0.0000023463 -0.0008871049 -0.0001497491 -0.0001504463 -0.0017350336 -0.0003129768 -0.0005191169 -0.0007868799 0.0001351953 -0.0008602227 0.0006827539 0.0006513304 -0.0001026733 0.0026884058 0.0004546868 -0.0013698936 -0.0011658230 0.0006595390 -0.0013182257 -0.0072919308 -0.0026412864 -0.0000871384 0.0000152550 -0.0020196313 -0.0003530773 -0.0032749914 -0.0003151912 -0.0003024772 -0.0013584193 -0.0001594841 -0.0060565687 0.0086626952 0.0028975631 -0.0017406414 -0.1089921647 0.0015967765 -0.0420215101 -0.0298354875 -0.0259069559 0.0001456708 0.0132686801 0.0071742410 -0.0056443106 -0.0185029861 -0.0102747642 0.0057033821 0.0052227521 0.0011389042 -0.0000828852 -0.0001824109 0.0001635783 -0.0000789404 0.0004982408 -0.0002071957 0.0005260694 -0.0000210787 -0.0005050496 -0.0001807352 0.0001166793 -0.0002092411 -0.0004941477 0.0021063216 0.0016553578 -0.0004796166 -0.0003565003 -0.0000278883 -0.0020224545 -0.0035328316 0.0021095508 -0.0009770741 0.0011099318 0.0011642727 0.0007380025 -0.0025184011 -0.0016143906 -0.0026005118 -0.0019512266 -0.0026118160 0.0007025802 0.0027434226 0.0074458042 -0.0084891774 -0.0003590073 0.0014840889 -0.0010098279 -0.0004448034 0.0010361863 0.0006365300 -0.0016186205 0.0000343762 -0.0000001798 0.0004511683 0.0001364482 -0.0026079767 -0.0015031481 -0.0016228568 -0.0001984574 0.0028740527 0.0015265475 -0.0015428858 -0.0026545479 0.0005525647 0.2074120356 -0.0832537060 0.0264653628 -0.2382625792 0.0504072824 -0.0707543826 0.1653217687 -0.0940050965 -0.0311236769 -0.0942065151 0.0197434050 -0.0136066071 0.2002125793 -0.0407564016 0.0459576997 -0.1860621419 0.1232947378 0.0450123488 0.2880262250 0.0061024959 0.1702333221 -0.0640867025 0.1258034461 0.1265588611 -0.0321088296 -0.0051066842 -0.0208279911 -0.1647053903 -0.0331629054 -0.1080280482 0.1241672579 -0.1867541106 -0.1453914760 0.0577001294 0.0301767429 0.0060606285 -0.0427604570 -0.0307776555 -0.0376108660 0.0215247760 0.0142697225 0.0164445868 -0.0494167645 -0.0262082067 -0.0064668047 0.0446504897 0.0354259532 0.0413971292 -0.0616909903 -0.0203034637 0.0351059060 0.0201210250 0.0245375208 0.0560315556 0.0018859872 0.0063734292 0.0098971368 0.0457100045 0.0125580895 -0.0315661719 -0.0300209753 -0.0346773965 -0.0650443903 0.0029033351 -0.0024343319 -0.0024686800 0.0228591614 0.0085413110 0.0211359684 -0.0004827802 -0.0050577521 -0.0087340676 -0.0009129833 -0.0003780666 0.0000322700 0.0347503692 0.0011464658 -0.0055261839 -0.0457815856 0.0254414180 -0.0013556683 -0.1745975649 0.0568822893 0.0058606341 0.1338092253 -0.0893027495 0.0119900081 0.1853430171 0.0383098852 -0.0432316320 0.0075346376 0.1861426001 -0.0714608934 0.1560423323 0.0119544976 -0.0331734350 -0.1205605659 -0.0369460265 0.0353210530 -0.1668733567 0.0567955951 0.0171931841 0.0040164913 0.1706572936 -0.0631217989 0.0076714433 -0.0001758928 0.0128213139 -0.0071266360 0.0050509554 -0.0152915712 -0.0264819678 -0.0018845252 -0.0415158046 0.0193443883 -0.0097364977 0.0383280895 0.0313054980 0.0287279192 0.0313206733 0.0056033926 0.0497908028 -0.0285510111 0.0309493287 0.0194414884 0.0314433920 -0.0242667468 -0.0227726968 -0.0192325266 -0.0292525984 -0.0027492829 -0.0405064345 0.0048088262 0.0423433291 -0.0258565418 -0.0000359157 -0.0011867982 0.0001004710 -0.0058326332 -0.0064423332 0.0048069285 0.0022276111 0.0034923493 -0.0026708709 -0.0033746628 -0.0059142561 -0.0032337540 0.0001229301 -0.0009383491 -0.0000163696 0.0010921877 -0.0075875404 -0.0038222082 -0.0065656242 0.0009001112 -0.0036651420 0.0134217031 -0.0034874541 0.0010412784 -0.0580240463 -0.0004701946 0.0048423483 -0.0499502475 0.0210299101 -0.0007958938 0.0441091607 0.0080530410 -0.0079429189 -0.0119945745 0.0106829188 -0.0015077302 0.0243965737 -0.0092296742 0.0018287772 0.0579444790 0.0498837584 0.0410437442 -0.0398447994 -0.0387749989 -0.0246922260 0.0715438498 0.0053874575 0.0878436902 -0.1129138571 -0.0406310051 -0.1087294855 -0.1030833298 -0.0590562602 -0.0643192472 -0.0076976314 -0.0031189414 -0.0077674269 -0.0045037308 -0.0000911300 -0.0001988033 -0.0005866400 0.0004686235 0.0006306191 0.0006208322 0.0003096553 -0.0007089731 0.0002130687 -0.0002640352 -0.0001198516 0.0002513215 -0.0016511596 -0.0011356468 -0.0003507886 -0.0051439993 -0.0011029348 0.0015992393 -0.0021567777 -0.0018988116 -0.0012954939 0.0053291035 0.0029553045 -0.0019088044 0.0065537054 0.0033627489 -0.0046045974 0.0038324936 0.0042284940 0.0013687700 -0.0077262380 -0.0037392489 0.0050565189 -0.0055279561 -0.0047355862 -0.0019119239 -0.0064236397 -0.0011219949 0.0073603954 -0.0007906254 -0.0045801571 0.0008687025 0.0091385776 0.0022920069 -0.0013593666 -0.0005629165 0.0011027596 0.0026233177 -0.0012639365 -0.0028462629 -0.0013705161 0.0018160295 0.0036872961 -0.0048025015 0.0058682965 0.0030785935 0.0029202307 -0.0032160392 -0.0016733863 0.0074916501 -0.0068389737 -0.0041323125 0.0024418293 -0.0094265853 -0.0024322457 -0.0064925402 0.0066097256 0.0037625230 -0.0024622972 0.0081887185 0.0021970203 -0.0112787838 0.0048644566 0.0053721679 0.0033586687 0.0137512366 0.0007291120 0.0099236213 -0.0036000364 -0.0055107747 -0.0037183649 -0.0084632793 0.0002716411 0.0011925843 -0.0051427302 -0.0012596192 -0.0005749713 0.0013458027 0.0003635122 -0.0000515304 -0.0139368697 0.0005333810 0.1773368934 0.1265150017 0.1123025301 -0.0001741449 -0.0022737754 -0.0008446509 0.0011903162 0.0031987710 0.0017777640 -0.0012116424 -0.0010505608 -0.0002588922 0.0000729801 0.0000719035 0.0000538448 -0.0004441802 -0.0004385442 0.0000992374 0.0001487448 -0.0000096894 -0.0000417047 0.0000185112 -0.0000025212 -0.0000598810 0.0001275497 -0.0004667117 -0.0003832261 0.0000749140 0.0001838770 0.0000876948 0.0057015497 0.0043622133 -0.0019772758 0.0018757503 -0.0031154327 -0.0024961872 -0.0008466051 0.0041310357 0.0026998463 -0.0008421642 -0.0006623395 -0.0002981392 0.0002083346 -0.0000292732 0.0006741890 -0.0010591904 0.0002113906 -0.0000846408 -0.0001907640 -0.0002384099 -0.0000609710 0.0001696415 -0.0002907615 0.0003527989 0.0002552242 0.0001529579 0.0000787770 0.0002682590 0.0001690605 0.0000171503 -0.0000911736 -0.0005817038 -0.0003617315 0.0003887788 0.0001738409 -0.0000773048 0.0610205430 -0.0249027563 0.0074192049 -0.0710116575 0.0153446912 -0.0206511220 0.0497174546 -0.0287296457 -0.0098886749 -0.0283064729 0.0067204040 -0.0031611234 0.0597200251 -0.0124594430 0.0133655507 -0.0558373400 0.0372299683 0.0136942382 0.0855963564 0.0025347195 0.0505553799 -0.0201376441 0.0381210516 0.0378666437 -0.0088654386 -0.0019947097 -0.0066825095 -0.0488744958 -0.0102541538 -0.0325683668 0.0379574215 -0.0566050965 -0.0437091452 -0.2471927178 -0.1296688626 -0.0274910627 0.1838205081 0.1330650000 0.1643342054 -0.0918197477 -0.0625298420 -0.0753224484 0.2116477734 0.1129075317 0.0295396579 -0.1925731011 -0.1529666947 -0.1798569971 0.2658430730 0.0853947747 -0.1515785149 -0.0895947934 -0.1062421379 -0.2415076784 -0.0093230072 -0.0236105327 -0.0342334027 -0.1948189056 -0.0535859252 0.1382370832 0.1324785170 0.1506007457 0.2828748154 0.0006250404 -0.0004324584 -0.0003317611 0.0065121730 0.0025369051 0.0062228558 0.0019990377 0.0192004837 0.0329352565 0.0051037144 0.0011989954 -0.0019213926 0.0033877747 -0.0061050134 0.0017764421 -0.0088579137 0.0131775585 -0.0038463406 -0.0373186125 0.0151216714 0.0001038488 0.0296536436 -0.0238990187 0.0042505655 0.0407874969 0.0111255570 -0.0107526141 -0.0014677300 0.0421995749 -0.0157108517 0.0284382565 -0.0004138591 -0.0049547142 -0.0210777520 -0.0021581806 0.0045265033 -0.0281339237 0.0062341645 0.0024022045 -0.0023304307 0.0306435728 -0.0106071673 -0.0217523360 -0.0217306488 -0.0181680963 0.0122447088 0.0020092481 0.0191947838 0.0613090003 0.0110322221 0.0901010472 -0.0445420107 0.0105644527 -0.0788169141 -0.0667809634 -0.0529393798 -0.0674710946 -0.0171603765 -0.1127555739 0.0568695157 -0.0814180479 -0.0586947906 -0.0763990179 0.0676330513 0.0738329786 0.0452002745 0.0742120534 -0.0010831456 0.1110024109 -0.0198493041 -0.1182109851 0.0624627763 0.0003149089 0.0002118210 -0.0000510706 -0.0004844895 0.0017257605 -0.0010886797 -0.0007436387 -0.0018089714 0.0006817412 -0.0010080331 0.0014909493 0.0010388879 -0.0002736130 0.0001403640 -0.0000157806 0.0016540527 0.0045459560 0.0005677591 0.0037687497 -0.0011672356 0.0023830702 -0.0043237055 0.0013607096 -0.0011700666 0.0053073319 0.0006189751 -0.0007315760 0.0006184646 -0.0020678416 0.0005151807 -0.0019093822 -0.0012128441 0.0006763707 0.0014091890 -0.0009930197 0.0004421092 -0.0052357942 -0.0005943194 0.0004078933 -0.0008523192 0.0009556083 -0.0023339017 -0.0002879419 0.0002248909 -0.0004812298 0.0016931463 0.0005735321 0.0016763402 -0.0021415858 -0.0016656583 -0.0010009643 -0.0023202777 -0.0005093081 -0.0018358402 0.0020468570 -0.0015479030 0.0018985654 0.0023695152 0.0011898222 0.0008114284 -0.0013488000 0.0023520303 -0.0057204857 -0.0014869361 -0.0019179471 0.0028093280 0.0064783284 -0.0017136235 0.0067267913 -0.2245585990 0.2609760572 0.2839412916 -0.2200384646 -0.1227086002 0.0868380364 0.1786368864 0.2057545528 -0.0379951221 -0.2281588820 -0.2634173587 0.0534298635 -0.0657598250 -0.2652109071 -0.0506600327 -0.0857671030 -0.0905359144 0.0202899725 0.0766003626 0.2399589985 0.0400219792 0.1317717480 0.2050339819 -0.0092734809 -0.0962651404 0.2871317714 0.1494818139 -0.0100554475 -0.1436679009 -0.0436081716 0.0970615285 -0.1887052862 -0.1398490538 0.1226757048 0.0066838215 -0.0964838725 -0.1033323106 0.0261996569 0.0842465053 0.0517673357 -0.1021285931 -0.0649867857 0.0551657117 -0.0173201464 -0.0260986906 -0.0222855507 -0.0029910400 0.0088594883 -0.0370621752 0.0113689506 0.0168935910 -0.0158947554 0.0203374667 0.0097233540 0.0258919855 -0.0164017775 -0.0133776424 0.0136696427 -0.0046492026 -0.0061683558 0.0309004561 -0.0342353305 -0.0168170905 -0.0218539300 -0.0745604592 -0.0061268776 -0.0292651396 0.0190267567 0.0161874757 0.0161624357 -0.0020590528 -0.0070542701 0.0102941275 0.0183580502 -0.0018561302 -0.0330381085 -0.0277109884 -0.0008395759 0.0370333898 -0.1402687985 0.0185554598 0.0065844890 0.0045437330 0.0023556496 0.0002417752 0.0227055600 0.0135753258 -0.0061283279 -0.0312221280 -0.0193519658 0.0081604719 0.0076026981 0.0021343237 0.0001233833 0.0004572583 -0.0002771022 -0.0002543964 -0.0006734177 0.0001411750 -0.0006191124 -0.0005963347 0.0009487406 -0.0003580547 -0.0002864991 0.0002522806 -0.0019985374 0.0038009677 0.0036942048 -0.0009615451 -0.0003878016 0.0000872951 -0.0007736541 0.0032381170 -0.0019684540 -0.0012377228 0.0018885051 -0.0002127587 0.0005548592 0.0006468741 0.0012890416 -0.0019857105 -0.0015674841 -0.0014024544 0.0003063529 -0.0051356331 -0.0018030703 0.0055620007 0.0069695730 -0.0063117036 0.0000050628 -0.0000651281 -0.0003198566 0.0002560546 -0.0011756819 -0.0012717526 0.0002093271 0.0012403592 0.0009139206 -0.0015700113 -0.0035105630 -0.0038713527 -0.0009047544 0.0018247575 0.0019093268 -0.0012563477 -0.0042173247 0.0000031631 -0.0065900801 0.0033730365 0.0002194989 0.0080206402 -0.0023450366 0.0012975763 -0.0066370069 0.0048600506 0.0022868325 0.0029331081 -0.0023487811 -0.0015954254 -0.0064408138 0.0020414244 -0.0006112013 0.0067624506 -0.0049791622 -0.0021036827 -0.0094322150 -0.0036869521 -0.0033591557 0.0057847133 -0.0096979125 -0.0042001465 0.0022140237 0.0008544454 0.0020091083 0.0052404049 0.0019275177 0.0045392474 -0.0054793138 0.0072984085 0.0051619511 -0.0096478637 -0.0049625823 -0.0003572370 0.0067752593 0.0045281334 0.0047746352 -0.0047916153 -0.0023797648 -0.0004969073 0.0091786841 0.0047019507 0.0001664713 -0.0073961966 -0.0056338845 -0.0059254084 0.0102285866 0.0041932914 -0.0051448650 -0.0019372071 -0.0027063491 -0.0083223272 0.0021204517 -0.0001584827 -0.0013157189 -0.0068530451 -0.0052828185 0.0054490324 0.0046407439 0.0062949501 0.0115825215 -0.0002165527 -0.0000687765 -0.0001565919 -0.0014401963 -0.0005495109 -0.0014155126 -0.0003139269 0.0002533079 0.0002905856 -0.0013031255 0.0001630947 0.0006222508 -0.0062538117 0.0004896787 0.0007443519 0.0057662494 -0.0017605608 -0.0002835992 0.0121571904 -0.0033410071 -0.0006592437 -0.0084846036 0.0051753886 -0.0005772318 -0.0135772432 -0.0018457575 0.0028518209 -0.0009851328 -0.0114756832 0.0045436874 -0.0116239183 -0.0007304531 0.0024062127 0.0084668399 0.0030004650 -0.0026333551 0.0128132753 -0.0038405022 -0.0013736903 -0.0000943516 -0.0111210182 0.0041602106 0.0019696182 0.0011862020 0.0022148336 -0.0024844450 -0.0010516639 -0.0028008539 -0.0029141514 -0.0005368340 -0.0042528899 0.0019083998 -0.0007944372 0.0036358486 0.0031064796 0.0023374709 0.0031426053 0.0006307119 0.0046650915 -0.0024150254 0.0035073759 0.0021652617 0.0035941228 -0.0025084728 -0.0024740418 -0.0018978813 -0.0036612330 -0.0005097395 -0.0049335015 0.0004617084 0.0042360320 -0.0025774944 0.0005734007 -0.0012716919 -0.0003428980 -0.0163524355 -0.0159709503 0.0128459263 0.0027223204 0.0028828391 -0.0055813308 -0.0096406623 -0.0124350207 -0.0080897033 -0.0010745411 -0.0016895841 0.0001364497 0.0159801304 -0.0011055331 -0.0120068967 0.0083057072 -0.0100014268 0.0038942586 0.0200513139 -0.0018413425 -0.0032767368 0.1051960926 0.0047101164 -0.0103292104 0.1756367659 -0.0338101491 -0.0120258317 -0.1410354850 -0.0000437395 0.0160081732 0.0678536784 -0.0213732284 -0.0053754286 -0.0512035350 0.0344800439 -0.0109110450 -0.0775022754 -0.0783552314 -0.0413810010 0.0885709605 0.0637240706 0.0822714240 -0.1447258403 -0.0445018922 -0.1567475796 0.1028316589 0.0237174533 0.1140472860 0.1980381040 0.0817799232 0.1723888148 0.0029854540 0.0059040975 0.0024530264 0.0020145383 -0.0034974785 0.0002636473 0.0038716961 -0.0003429156 0.0009763179 -0.0029644027 -0.0010500021 0.0014189792 -0.0015026697 0.0008177962 -0.0024210492 0.0000753351 0.0016105983 0.0014625616 -0.0055887838 -0.0002858611 0.0024637050 0.0035097229 0.0061470857 0.0000069588 -0.0047980422 -0.0088506604 -0.0001584620 -0.0007721546 -0.0102005129 -0.0030330268 0.0001889459 -0.0038929750 -0.0014938053 0.0010199669 0.0089508024 0.0026458501 0.0021977318 0.0093740728 0.0018851043 -0.0012120404 0.0127023939 0.0056646637 -0.0046892133 -0.0025088036 0.0016518625 0.0017484346 -0.0086561217 -0.0041747497 0.0012808759 0.0012115912 -0.0005571434 -0.0009629831 -0.0002579726 0.0006234393 -0.0007391468 -0.0007429666 0.0007075959 0.0007681923 -0.0000929432 -0.0003931248 -0.0003544667 -0.0000428058 0.0001473532 -0.0005910342 0.0002004977 0.0002812337 -0.0002692229 0.0003710401 0.0001329858 0.0003947830 -0.0002503977 -0.0002544818 0.0002290927 -0.0000900398 -0.0000994118 0.0006248303 -0.0006179811 -0.0003077883 -0.0000980122 -0.0018163659 0.0003844909 -0.0001957473 0.0001373173 0.0009829087 0.0002951977 -0.0000760256 -0.0001089606 0.0001959640 0.0003055722 -0.0000443428 -0.0004112061 -0.0019012670 -0.0003623114 -0.0043777437 -0.0030162633 0.0035012985 -0.0300330649 -0.0215413163 -0.0323578992 -0.0000577997 -0.0005699840 -0.0001464626 0.0008707232 0.0007921986 0.0001361154 -0.0005278834 -0.0003659534 0.0000004095 0.0000918271 -0.0000059508 -0.0001952488 -0.0000848314 -0.0004421687 0.0002091275 -0.0002962597 0.0004607859 0.0001111384 -0.0000058673 0.0000354649 0.0001805682 -0.0002400808 0.0000505097 0.0001457174 0.0000168259 -0.0000509710 -0.0000393282 0.0014636075 0.0040490584 -0.0018812799 0.0004495938 0.0000660968 -0.0017282754 -0.0008555541 0.0016266730 0.0010441738 -0.0012700756 -0.0005267968 0.0022048651 0.0008227993 -0.0052425768 -0.0024333635 0.0047451067 -0.0006703680 -0.0002245910 0.0001083857 0.0000543941 -0.0002282236 0.0000080108 0.0001045666 -0.0004379560 -0.0001639316 -0.0000469232 0.0000267853 0.0003867284 0.0000828580 0.0001681425 -0.0000470213 -0.0005040087 -0.0003150328 0.0002776600 0.0002006555 -0.0002624907 -0.0383720437 0.0143759646 -0.0037733563 0.0237784617 -0.0039511864 0.0082188115 -0.0138209898 0.0085548041 0.0030058035 0.0071689317 -0.0027520510 -0.0003444646 -0.0176928200 0.0043805850 -0.0035578723 0.0199818590 -0.0132501035 -0.0060933682 -0.0310328347 -0.0009993886 -0.0138227765 0.0056805600 -0.0106275280 -0.0097617633 0.0049092293 0.0042112760 0.0084754592 0.0132821642 0.0036357093 0.0104034817 -0.0184478257 0.0202452620 0.0186370613 0.0173868821 0.0085567128 0.0070775386 -0.0119078795 -0.0100929127 -0.0143212060 0.0015599209 0.0033533579 0.0094442861 -0.0048170293 -0.0041052412 -0.0043269981 0.0094560968 0.0108082357 0.0189353751 -0.0307362850 -0.0010395331 0.0151954646 0.0084395491 0.0089430432 0.0167693739 -0.0088512378 0.0085052319 0.0198156018 0.0037358602 0.0000957074 -0.0071711844 -0.0174562569 -0.0094987858 -0.0154792041 0.0004068277 -0.0016870634 -0.0025698844 -0.0042184671 -0.0018974611 -0.0044420875 0.0003223832 -0.0062186034 -0.0111088815 0.0074797359 -0.0008910773 -0.0056014563 0.1498837095 -0.0010687979 -0.0214362264 -0.1243841409 0.0014990556 0.0212982021 -0.1562738464 0.0273205452 0.0146498126 0.0954094195 -0.0430543580 0.0006030930 0.1771825253 0.0044562674 -0.0284110653 0.0251204900 0.1190238739 -0.0492311136 0.1664347496 0.0137112936 -0.0361212001 -0.1138909394 -0.0535212013 0.0403337180 -0.1966567059 0.0583367558 0.0206033845 0.0060525755 0.1428962149 -0.0530374213 -0.1150349635 -0.0504504358 -0.1423916045 0.1486273163 0.0570477216 0.1690773820 0.1353336955 0.0282486477 0.1953788013 -0.0818891351 0.0374225267 -0.1589475233 -0.1621246211 -0.1149205767 -0.1792887608 -0.0302599856 -0.1910270230 0.0949996944 -0.1533094300 -0.0860757781 -0.1643477186 0.1006521053 0.0935347074 0.0808234211 0.1687393775 0.0383562071 0.2146804675 -0.0120929891 -0.1613058746 0.1076898909 -0.0000708519 0.0001186438 -0.0000464610 0.0006068707 -0.0003445216 0.0002316508 -0.0000059066 0.0000017309 0.0001967518 0.0003282605 -0.0001027919 -0.0002807534 -0.0000902116 0.0001068901 -0.0001775220 0.0005539573 0.0012603654 -0.0001755527 0.0023266251 -0.0013416970 0.0013185187 -0.0006609037 0.0001340739 0.0002123189 -0.1881700868 -0.0101671655 0.0212103676 -0.2841514020 0.0568719820 0.0160686116 0.2409299896 0.0004694058 -0.0275714645 -0.1670044863 0.0254151305 -0.0067050427 0.1130753735 -0.0590457180 0.0213490118 -0.0699409313 -0.0621030764 -0.0395148237 0.0966171370 0.0528713365 0.0727381162 -0.1082863132 -0.0331714079 -0.1176225092 0.0792695585 0.0174929066 0.0908150553 0.1421209332 0.0588996515 0.1208743460 0.0017067774 0.0059317783 0.0022574265 -0.0051969359 0.0076585494 0.0004112504 0.0010677023 -0.0049690703 -0.0022257991 0.0000839393 0.0013871943 0.0005534531 -0.0003466530 0.0010462421 0.0010018841 -0.0008965223 0.0006248157 0.0000793406 0.0017969611 0.0016806111 -0.0011615353 -0.0011718427 -0.0013768167 0.0002807651 0.0007872448 0.0017442266 0.0001414993 0.0003716378 0.0019254083 0.0004392470 0.0005858916 0.0006267292 -0.0001176591 -0.0003635971 -0.0016173871 -0.0003879198 -0.0004532204 -0.0017083771 -0.0003007387 0.0005880428 -0.0020966229 -0.0009400360 -0.0013152264 0.0016406181 0.0010114080 -0.0004191821 0.0015475881 0.0012372130 0.0003746465 -0.0004183989 -0.0004656859 -0.0003512852 0.0000767503 0.0004442781 0.0001677973 -0.0002980800 -0.0008083867 -0.0003160294 0.0004181866 0.0001987687 0.0002290092 -0.0002139606 -0.0001306960 0.0005263236 -0.0005050763 -0.0003039182 0.0002569764 -0.0008852677 -0.0001718992 -0.0004931687 0.0004871528 0.0003947513 -0.0001790387 0.0005673333 0.0001495553 -0.0008693279 0.0003642780 0.0003731631 -0.0001805539 0.0028259103 -0.0007634148 0.0004676688 -0.0001246517 -0.0021044658 -0.0002807317 -0.0005172363 -0.0000112989 0.0000636735 -0.0003936555 -0.0000936771 0.0000883628 0.0004187135 0.0000885371 0.0004347715 -0.0011628444 -0.0009449104 -0.0225895232 -0.0156813964 -0.0244297976 0.0000995204 0.0013361354 0.0006411602 -0.0012599329 -0.0021195736 -0.0009046749 0.0010241984 0.0008085354 0.0001406794 -0.0001731352 -0.0000457899 0.0000460577 0.0001882606 0.0001919227 -0.0002183773 0.0001871726 -0.0006479692 -0.0000043002 0.0000303775 -0.0000335526 -0.0000687431 0.0001409242 0.0001739682 0.0000481633 -0.0000323153 -0.0000514861 -0.0000156209 -0.0022268388 -0.0019925768 0.0008893124 -0.0008654351 0.0002384370 0.0023174744 0.0009954335 -0.0008534415 -0.0003483881 0.0026376942 0.0015056124 -0.0021314730 -0.0015423127 0.0072909485 0.0018626877 -0.0039789910 -0.0000564124 0.0006303713 -0.0000273730 0.0000104220 0.0002027104 -0.0001093579 0.0001609541 0.0000332126 -0.0001849394 0.0000713106 -0.0000111488 -0.0006736472 -0.0001222075 -0.0001422071 0.0000665021 0.0008093450 0.0003377010 -0.0004438589 -0.0002833964 0.0002547917 0.0654618513 -0.0232440711 0.0057907904 -0.0374672125 0.0058432871 -0.0134525412 0.0209326891 -0.0133186320 -0.0047687766 -0.0109333738 0.0049304045 0.0014161222 0.0276231281 -0.0071225964 0.0054535531 -0.0321644761 0.0211307690 0.0099649698 0.0493397750 0.0004282208 0.0225973253 -0.0087076899 0.0155448056 0.0144611542 -0.0085307973 -0.0100142717 -0.0188639257 -0.0206445122 -0.0058997824 -0.0167496582 0.0303381385 -0.0318989070 -0.0309499309 0.0129359135 0.0062803673 0.0050250490 -0.0087179209 -0.0070537684 -0.0091555627 0.0021384707 0.0020579780 0.0042807472 -0.0035399209 -0.0026982266 -0.0020215881 0.0061877345 0.0072712465 0.0129594908 -0.0234578478 -0.0012221366 0.0113330808 0.0048233772 0.0058013600 0.0122699307 -0.0106660390 0.0086149176 0.0214474159 0.0032646173 0.0006456500 -0.0037936131 -0.0116079516 -0.0060400824 -0.0095672202 -0.0014238834 0.0044994491 0.0066598328 0.0081372695 0.0038970731 0.0089130352 0.0005561772 -0.0062228749 -0.0113358482 0.0085063784 -0.0009671654 -0.0064350698 -0.2297198217 0.0169593039 0.0274714067 0.1999819679 -0.0142965816 -0.0266601758 0.2177522567 -0.0397005461 -0.0198490979 -0.1290593785 0.0647721271 -0.0033761008 -0.2504688276 -0.0066722196 0.0410287699 -0.0309840133 -0.1595453397 0.0652051869 -0.2253639862 -0.0105793283 0.0455691500 0.1462924041 0.0620913577 -0.0493960591 0.2705167332 -0.0719102899 -0.0393074574 0.0011135504 -0.1778416038 0.0654001124 -0.0844938575 -0.0443044882 -0.0946190841 0.1029430105 0.0488411443 0.1097781475 0.0824271984 0.0224496133 0.1144326582 -0.0473399498 0.0164810111 -0.0879128113 -0.0941502146 -0.0651551231 -0.1149967561 -0.0208062271 -0.1056496889 0.0474079762 -0.0952935015 -0.0546785579 -0.1012119819 0.0616562508 0.0609254556 0.0465417563 0.1057592175 0.0237555362 0.1358430013 -0.0084176035 -0.0969538585 0.0625559522 -0.0001023786 -0.0001162867 -0.0000031764 0.0001792482 -0.0009343633 0.0005642023 0.0004078454 0.0008564107 -0.0000174509 -0.0000330177 -0.0007191154 -0.0004206364 0.0001009236 -0.0001329935 -0.0001374580 -0.0005674370 -0.0013619513 -0.0003140738 -0.0014863203 0.0013010496 0.0000724858 0.0012295832 -0.0011549373 0.0012411405 -0.0225685120 -0.0116737802 -0.0025125122 -0.0190154749 0.0065743701 -0.0091542134 0.0189479054 0.0049002831 -0.0027113306 -0.0117095593 0.0014653598 0.0005582683 0.0116692431 -0.0008047577 0.0008526848 -0.0008694426 -0.0009177380 -0.0001163063 0.0023764690 0.0008234965 0.0011544664 -0.0014271626 -0.0005101930 -0.0015174671 0.0008603788 0.0002147948 0.0011370330 0.0017005978 0.0007684034 0.0016548946 -0.0003479949 0.0002947487 -0.0003916052 -0.0011768526 0.0001500015 -0.0003545615 -0.0000952648 -0.0004540213 0.0004728373 0.0003420925 0.0001096476 -0.0004965539 -0.0009177231 0.0001561800 -0.0008199777 0.0103273755 -0.0056529606 0.0027164002 0.0025590677 0.0013309982 -0.0005307503 -0.0023325447 -0.0022520653 0.0006067064 0.0047939474 0.0024913265 -0.0022377720 0.0010290153 0.0034305167 0.0004156799 0.0014346180 0.0006726273 -0.0006813780 -0.0013089626 -0.0018820175 0.0000999820 -0.0037916502 -0.0044819263 0.0010356110 0.0019400312 -0.0047264635 -0.0015319014 -0.0001770464 0.0014139321 0.0010656407 -0.0013109336 -0.0002395284 0.0014370090 -0.0019970603 -0.0000664368 0.0007824358 -0.0020281461 0.0024534494 0.0018717099 0.0058688289 -0.0034127183 -0.0024155602 0.0110352491 -0.0100642576 -0.0062747032 -0.0082021014 0.0011582351 0.0037369770 -0.0125190414 0.0097224644 0.0068314885 -0.0066412747 0.0166405749 0.0041245672 0.0117237145 -0.0065246674 -0.0093236545 0.0051620327 -0.0082778753 -0.0030351906 0.0194572770 -0.0110013938 -0.0094443720 0.0007361693 -0.0667930118 0.0144819640 -0.0025710935 0.0010849898 0.0556440644 0.0069269245 0.0079261766 -0.0014243945 0.0058470380 0.0121168381 -0.0023879114 0.0016945731 0.0020368434 -0.0004935364 -0.0070278599 -0.0029356927 0.0091956510 0.0006870134 0.0002339796 -0.0007083130 -0.0003444564 -0.0089733546 -0.0053945129 0.0053987037 0.0144372761 0.0072171165 -0.0053279853 -0.0047956908 -0.0010224032 0.0000610052 0.0006689626 0.0004390189 0.0001500869 -0.0002783553 -0.0002455369 -0.0027437955 0.0002540786 -0.0031794947 -0.0004661665 -0.0008469307 0.0004394785 0.0001649785 -0.0018824681 -0.0012517505 0.0000282589 0.0006203093 0.0001470997 0.0009320159 -0.0019072829 0.0004565619 -0.0001650359 -0.0000159246 0.0008511783 0.0003109030 0.0005725078 0.0003683295 0.0270139891 0.0190990044 0.0297508149 -0.0059319616 0.0112015887 -0.0027964954 0.0161356719 -0.0203301397 0.0100421338 0.0079253090 0.0054413979 -0.0084583647 -0.0034479147 0.0062209923 -0.0010238913 0.0047138492 -0.0056726682 -0.0013423917 0.0062289479 0.0024035330 0.0031557551 0.0000027152 -0.0041884310 -0.0005503454 0.0026376894 0.0043495424 -0.0012060082 0.0444595000 0.0745184883 0.1043887355 -0.0848508016 -0.0291617381 -0.0769506822 0.0104299701 0.0893988824 0.1090245474 -0.0808329920 -0.1693355184 -0.2400997609 0.0715356572 0.0648763992 0.1081217068 0.0198560519 -0.0735485640 -0.0702576716 0.1694261091 -0.0565269411 0.0230553538 0.1752026488 -0.0187546729 0.0441454189 0.1769611737 0.3438230837 0.5890159598 -0.1401811698 0.0949972945 0.0531088930 -0.1272205801 0.0711855668 0.0056745461 -0.0012692515 -0.0005424667 0.0004629066 0.0006831121 0.0002131727 -0.0004044417 -0.0011895452 -0.0000927810 0.0014350323 0.0012215420 0.0004251725 -0.0006603402 -0.0005848132 -0.0002720200 0.0001022358 0.0016148740 0.0010527092 -0.0002059727 0.0010601010 0.0001041859 -0.0003963986 0.0022904906 -0.0009746712 -0.0030279673 -0.0009118681 -0.0009191953 -0.0001618940 -0.0001901355 0.0000688337 0.0007690480 0.0530902261 -0.1685078802 -0.2443463441 -0.1940958895 -0.1039722484 -0.2278936857 -0.0002380901 0.0007023336 0.0012908012 -0.0015583460 0.0001629885 0.0010958297 -0.0098440629 -0.0022552447 0.0033242388 0.0097715968 0.0027129136 -0.0028951075 0.0046767655 0.0007532995 -0.0011006075 -0.0019240092 -0.0009788425 0.0006304634 -0.0052096306 0.0018579804 0.0004415851 -0.0019149107 -0.0016188112 0.0010674916 -0.0081305629 -0.0009598317 0.0018369454 0.0049602721 0.0035708494 -0.0022153430 0.0107782099 -0.0031078800 -0.0012255163 -0.0006010258 -0.0052248794 0.0021006547 -0.0014062006 -0.0011099479 -0.0010981670 0.0014173334 0.0009951760 0.0012646473 0.0009408649 0.0004146823 0.0011119227 -0.0004603318 -0.0000308514 -0.0007326326 -0.0008548731 -0.0003420520 -0.0010975387 -0.0004290203 -0.0008046814 0.0002984694 -0.0011614108 -0.0007559277 -0.0011780174 0.0007469194 0.0008675076 0.0004389754 0.0012811044 0.0003079787 0.0018836686 -0.0002338530 -0.0010400391 0.0006942879 0.0001158178 0.0008662213 -0.0001550587 0.0038475209 0.0029676885 -0.0021043645 -0.0012070272 -0.0024591258 0.0025257890 0.0008487108 0.0026634589 0.0015833973 -0.0002704089 0.0005897503 -0.0001938968 0.0019055042 0.0042654625 0.0007517092 0.0045973590 0.0013214562 0.0057256214 -0.0090118054 0.0004305936 0.0021305661 0.0038064382 0.0002635813 -0.0005725732 0.0049077385 -0.0009453487 -0.0001518405 -0.0047286758 0.0000772479 0.0005120607 0.0055115400 -0.0003953996 0.0009137564 -0.0032533760 0.0012288037 -0.0005336312 0.0118976938 0.0065791538 0.0117757395 -0.0121990667 -0.0063418260 -0.0107463185 0.0143192810 -0.0012988316 0.0227124198 -0.0131407752 0.0032650963 -0.0338536990 -0.0138682910 -0.0199648997 -0.0133761216 -0.0006597281 -0.0009423838 -0.0012131454 0.0002534519 -0.0002756738 -0.0002336723 -0.0008791783 0.0002948758 0.0008168428 0.0011888655 0.0002952445 -0.0009916451 0.0001071933 -0.0002217305 -0.0005497735 -0.0092625860 0.0137270588 0.0153335918 0.0132462450 0.0362948311 -0.0148133260 -0.0131768035 -0.0048174001 0.0072532660 0.0009364567 -0.0013298470 -0.0010629618 0.0063346764 -0.0021572533 -0.0043581180 0.0161556371 -0.0035336641 -0.0112987300 -0.0045178856 0.0049924073 0.0038956989 -0.0063100544 0.0046965263 0.0052272659 0.0076548546 0.0121871020 0.0004843750 -0.0495751692 0.0249536245 0.0333134719 -0.0014940149 -0.0094151937 0.0100063177 0.0103954981 -0.0030771822 -0.0102595044 -0.0117251216 0.0031561628 0.0118546124 0.0069474584 -0.0119492140 -0.0100878424 0.0048621056 -0.0024174878 -0.0027029486 -0.0014787146 -0.0001588435 0.0006164376 -0.0029788692 0.0008493344 0.0013634768 -0.0013055968 0.0016617784 0.0007846815 0.0017732777 -0.0010988577 -0.0009255619 0.0010419859 -0.0001929069 -0.0004399030 0.0034545596 -0.0035886300 -0.0013161024 -0.0017381906 -0.0057281565 -0.0000738358 -0.0023589952 0.0015750439 0.0017761763 0.0013472466 -0.0005845039 -0.0004602098 0.0007223326 0.0012365430 -0.0001509370 0.0007579928 -0.0017559641 -0.0007848298 -0.0001316323 0.0145534071 0.0044374694 -0.0423283910 0.0098357687 0.1249914434 0.0007757907 0.0029929055 0.0002785289 -0.0024477689 -0.0035745109 -0.0019825104 0.0020217027 0.0017733361 0.0004747955 -0.0004147442 -0.0003800175 -0.0000954468 0.0007037714 0.0001694816 0.0000735207 0.0001935629 0.0001648077 -0.0002395040 0.0000815210 0.0001595551 0.0000459266 0.0000034952 0.0008284611 0.0005281947 -0.0000229687 -0.0006758676 -0.0003628640 -0.0055627576 -0.0013466488 -0.0002671188 -0.0011678693 0.0022085445 0.0017540109 -0.0011481743 -0.0011332721 -0.0015019294 0.0002630063 0.0002336659 0.0001660534 0.0000359718 0.0013679392 0.0014110604 -0.0022465194 -0.0018983572 0.0019324616 -0.0004010851 -0.0002938572 -0.0000093254 0.0001408180 -0.0001240429 -0.0000613360 -0.0003547728 -0.0004078477 -0.0002400729 -0.0004194938 0.0004000604 0.0013410386 0.0006063798 0.0014020074 0.0007064247 -0.0010017006 0.0011137515 0.0001717289 -0.0009904078 0.0007191900 0.0004011634 0.0000925496 -0.0001259403 -0.0000947477 -0.0000874787 0.0005683463 0.0005795842 -0.0001886884 -0.0009456075 -0.0012223319 -0.0000173159 0.0004094366 0.0004142268 0.0005806230 -0.0006599569 -0.0005231758 -0.0000146544 -0.0002745400 -0.0001795617 0.0005518001 0.0000026967 0.0003976143 0.0006723373 0.0022273478 0.0037891868 -0.0006416636 0.0003827368 0.0005468322 -0.0011939409 0.0006896737 0.0006406033 0.0747663066 0.0203243724 -0.0677943048 -0.0241160324 0.0257696828 0.1321446727 0.1131766758 -0.0317867290 -0.2639915250 -0.0764910306 -0.0047770859 0.1118050303 -0.0098501993 -0.0328152733 -0.1010791388 -0.1212690134 -0.0700657504 -0.0289193673 -0.1544911766 -0.0775731753 0.0047397291 -0.3237943007 0.2221272640 0.6027389703 0.1114417565 0.0787884832 0.1034980659 0.1171651555 0.0752754879 0.0595351168 0.0004898220 -0.0011457975 -0.0017152480 -0.0010306340 -0.0005939838 -0.0013774325 0.0234880336 -0.1531413421 -0.2886178060 0.2377089904 -0.0298988364 -0.1907736064 0.0040464089 -0.0010094357 -0.0002330651 -0.0039910204 0.0010229936 0.0001230385 -0.0032675714 0.0007385418 0.0002394179 0.0018443833 -0.0012616558 0.0001725089 0.0039400835 0.0001980659 -0.0006422483 0.0002636330 0.0022246835 -0.0007972540 0.0029822776 -0.0002417702 -0.0004465713 -0.0015937390 -0.0003471734 0.0004079517 -0.0035796335 0.0005050064 0.0008538222 -0.0003741445 0.0018640402 -0.0005360595 0.0063831129 -0.0011313701 0.0108275266 -0.0070821089 0.0012842351 -0.0101364643 -0.0044986659 -0.0006045607 -0.0067886757 0.0019983736 -0.0027572675 0.0053381337 0.0062944631 0.0046878880 0.0075435864 0.0002997855 0.0040435271 -0.0024543284 0.0018581876 -0.0008247383 0.0034926990 -0.0000552372 0.0017916080 -0.0016616091 -0.0034690460 -0.0028368448 -0.0017725944 -0.0014644270 -0.0003262407 -0.0016270909 -0.0024746678 0.0004827803 -0.0008081298 0.0175138689 -0.0171551957 0.0099623016 0.0061272695 0.0130033706 0.0054534967 0.0057579654 -0.0117164403 -0.0090054081 0.0006074993 -0.0004030680 -0.0048500760 -0.0032871409 -0.0175689545 -0.0075397094 -0.0092968102 0.0275321126 0.0232643339 0.0028440507 -0.0288236725 0.0398364884 0.0002647572 0.0001377759 -0.0000718426 0.0003139975 -0.0008641218 0.0001442029 -0.0001289135 0.0001345817 -0.0000025983 0.0004146630 0.0000295244 -0.0000893303 -0.0020684997 -0.0009589876 0.0003740750 -0.0010286327 0.0000366392 -0.0020840327 0.0002848357 0.0001350096 0.0003758742 -0.0001822402 -0.0002383019 0.0000465027 0.0002637562 -0.0000490908 0.0003887744 0.0007347347 0.0010793378 -0.0001053634 0.0022726354 -0.0018201859 0.0028359257 0.0016799794 0.0013650913 0.0017314586 -0.0008288065 0.0025146882 -0.0075526540 -0.0020183527 -0.0015916578 0.0030351642 0.0052672332 -0.0030110411 0.0083285678 -0.0024093016 0.0221428526 0.0154562387 0.0038890032 -0.0028220727 -0.0027485294 -0.0011417217 -0.0003636560 0.0006038107 0.0032253423 0.0041430635 -0.0009806686 -0.0000576430 0.0037644603 0.0008547505 0.0003775932 0.0006618511 -0.0000178448 0.0004646352 -0.0011186941 -0.0008416790 -0.0045835136 -0.0128544112 -0.0009277964 0.0029218942 0.0006737666 0.0022362439 0.0014518308 0.0028236736 0.0004915083 -0.0054981617 0.0005265680 0.0044150091 0.0010719501 -0.0014123414 -0.0017071901 -0.0011638393 0.0005245694 0.0026417643 -0.0018649211 -0.0025447819 -0.0030610445 0.0000878326 -0.0001764446 -0.0002686555 0.0000407340 -0.0000919069 -0.0000198146 -0.0001062557 -0.0000740788 0.0000713460 0.0000682617 -0.0000290085 -0.0000751258 0.0000500760 0.0000791264 -0.0000242112 0.0000417858 -0.0000518389 -0.0000170174 -0.0003420552 0.0000846172 0.0000220552 -0.0001214963 0.0011249549 0.0007801384 0.0003898795 -0.0002241631 -0.0001886675 -0.0005013764 -0.0001501489 0.0001453897 -0.0000554665 0.0003286752 0.0000590248 -0.0655673168 0.0014548076 0.0031352566 0.9938972700 0.0541385285 -0.0552211435 0.0001177452 0.0002285303 0.0000278313 -0.0002151924 -0.0008581026 -0.0015599122 0.0004989293 0.0023414435 0.0013649975 -0.0012561151 -0.0008893156 -0.0001710055 0.0005308405 0.0000634552 -0.0000251634 -0.0001678015 -0.0008887521 -0.0004199134 -0.0002059073 0.0007651210 0.0007264327 -0.0002574006 -0.0000064713 -0.0000109781 0.0003952332 -0.0003700286 -0.0004914393 -0.0000995215 0.0001263428 0.0000753099 -0.0005988265 0.0087183126 0.0073265484 -0.0012485330 -0.0005183750 -0.0010660954 0.0018497872 0.0030625182 -0.0024692046 0.0001953587 0.0006608417 0.0005357442 0.0005677656 -0.0021294796 -0.0012904759 0.0009104803 -0.0078069696 -0.0065207270 0.0005592884 0.0000803942 0.0003395445 0.0007322122 0.0000849208 -0.0003169937 0.0002470545 0.0000803487 -0.0002417141 0.0005892772 0.0011595503 -0.0014545981 -0.0014576100 -0.0002645899 0.0004799012 0.0022971838 -0.0002769103 0.0019758910 0.0000216367 0.0000108129 0.0001962249 0.0003100330 -0.0009397788 -0.0013154877 0.0003201945 0.0000745326 0.0003151462 -0.0003681687 0.0000872002 -0.0000252704 0.0000598687 0.0000400159 0.0000856636 -0.0000094336 0.0000060189 0.0000463954 -0.0050666187 0.0005910159 0.0114510811 -0.0001548309 0.0011940221 -0.0019248117 0.0007968930 0.0000280623 0.0002564477 -0.0000606231 0.0004664305 0.0002964788 -0.0003583973 -0.0000338070 -0.0002989751 -0.0001596276 -0.0001166966 -0.0000634755 0.0000560979 0.0000840197 0.0001656902 -0.0002456688 -0.0001521702 -0.0000753873 0.0001410159 0.0000501523 -0.0000342019 -0.0001595367 -0.0001023687 -0.0000563415 0.0003569165 0.0002484062 0.0000794763 0.0003389990 -0.0002307821 0.0000737278 0.0007413064 0.0002607307 0.0003137124 0.0008047654 -0.0001009756 0.0004854981 0.0009780652 0.0013063071 -0.0005873730 -0.0002138429 0.0000235770 0.0000060982 -0.0004068453 -0.0001247633 -0.0001828701 -0.0002047254 -0.0000887810 -0.0002836096 -0.0003695712 0.0000067052 0.0000087973 0.0000796099 0.0000543025 -0.0000376456 -0.0001770701 -0.0001155550 0.0000742570 -0.0000452136 0.0000398936 -0.0000061122 0.0001066358 0.0000275201 -0.0000266338 -0.0000457978 -0.0008224463 0.0003162445 -0.0003354442 -0.0001702351 0.0001061756 0.0000655664 0.0000287816 -0.0000156337 0.0000547198 -0.0000427104 0.0000133563 -0.0002315142 0.0002404554 -0.0001344270 -0.0004596845 0.0004015383 -0.0000581423 -0.0000954902 0.0000525270 -0.0001806917 0.0000459954 -0.0000343786 0.0000854144 0.0000440169 0.0000052424 0.0000789916 0.0000292748 0.0000484118 0.0000106101 -0.0002533954 -0.0002163332 -0.0002938957 -0.0003100019 -0.0004331158 -0.0002259518 -0.0000308903 -0.0000620185 0.0000028335 0.0000454967 -0.0000148410 0.0000936033 0.0002052561 0.0007294700 -0.0003602113 -0.0001472046 0.0000800785 -0.0003187497 -0.0000487203 0.0002355863 -0.0001040819 0.0004426039 -0.0007389518 -0.0004347011 -0.0007352445 0.0003034750 0.0002900770 0.0007617866 -0.0016702610 0.0021988418 -0.0002401608 0.0004450794 -0.0006581607 0.0040002702 -0.0012321949 0.0035547503 0.0009279960 -0.0034112579 0.0035794465 -0.0003337369 -0.0001819427 0.0015508204 -0.0000031264 -0.0000046466 0.0000014837 0.0000033089 0.0000146788 -0.0000057070 0.0000017496 -0.0000000572 0.0000001998 -0.0000057359 0.0000000295 0.0000007265 0.0000255457 0.0000073923 -0.0000071283 0.0000158623 -0.0000070358 0.0000285620 -0.0000041589 -0.0000015275 -0.0000045224 0.0000033086 0.0000099670 -0.0000034270 0.0000004065 0.0000025367 -0.0000041004 -0.0000307713 -0.0000944924 0.0000562297 -0.0000323705 0.0000128656 -0.0000103260 -0.0000333648 -0.0000178283 0.0000001972 0.0000554348 0.0000175418 -0.0000268395 -0.0000590643 -0.0000372072 0.0000153293 -0.0000168559 -0.0000134041 0.0000249524 -0.0007571247 -0.0014528290 -0.0000164895 0.0000612584 -0.0000641669 0.0000008503 0.0000272932 0.0000493743 -0.0000035697 0.0000617201 -0.0001002828 -0.0000660816 -0.0000040391 -0.0000458332 -0.0000133660 -0.0000660968 0.0000457858 0.0000460770 0.0004957109 0.0000713677 -0.0003309696 -0.0000277197 0.0000318932 0.0000475996 0.0001341564 0.0000417856 -0.0000710109 0.0000440060 0.0000753347 0.0000482292 -0.0048166881 -0.0010231539 0.0022876536 -0.0001721053 0.0001365749 0.0002843932 -0.0003232178 -0.0001367190 -0.0008547725 0.0044719673 0.0040721586 0.0019288878 0.0000511904 -0.0000028246 0.0000647789 -0.0000218217 -0.0000281758 -0.0000008745 0.0001167280 0.0002482660 -0.0000333744 0.0000154348 0.0000420008 0.0000035477 0.0000323564 -0.0000130703 -0.0000204255 0.0000289425 0.0000127101 -0.0000024966 -0.0018178890 -0.0024200911 -0.0002560337 -0.0001521751 0.0000735719 0.0001497187 0.0000398117 0.0000497991 -0.0000280994 -0.0002122865 -0.0000393687 0.0000857912 0.0000043663 0.0000007522 -0.0000213331 -0.0001070475 -0.0000116859 0.0000001242 0.0016586251 0.0001427031 -0.0001276163 0.0000094086 -0.0000029939 -0.0000091313 0.0008760581 0.0001298151 -0.0003464483 -0.0005102935 0.0009202385 0.0007484664 -0.0002212047 -0.0002974181 -0.0001008936 0.0000389399 0.0001335547 0.0000370304 0.0039044669 -0.0036087105 0.0019400911 -0.0000400876 -0.0000206296 -0.0001331997 -0.0001609987 -0.0007471666 -0.0008088173 0.0004114934 -0.0000217368 -0.0001268449 -0.0000565976 -0.0000880799 -0.0001441262 -0.0078159979 0.0313332758 0.0452238139 -0.0617640277 -0.0269546576 -0.0197407962 0.0239952857 0.0364423993 -0.0484379161 0.0006967014 -0.0009524384 0.0001346067 -0.0008643904 -0.0003235397 0.0001339825 0.0004355303 0.0010318906 0.0011878914 -0.0076197011 0.0078918000 -0.0022171473 0.0116386489 0.0055268491 0.0005455077 -0.0024133623 -0.0050721068 0.0106926261 0.0003190388 0.0014412004 -0.0013178552 -0.0015655212 -0.0000961662 0.0006370710 0.0024163486 -0.0000774424 0.0026460746 0.0000045614 -0.0000009455 0.0000005299 -0.0000045512 0.0000012556 0.0000005656 0.0000007675 -0.0000032411 -0.0000015189 -0.0000037198 0.0000031566 -0.0000000491 -0.0000004458 0.0000021662 0.0000033608 -0.0000038086 -0.0000004190 -0.0000015330 0.0000177730 -0.0000036493 -0.0000268492 0.0000147992 0.0000289442 -0.0000150223 0.0000138903 0.0000059643 0.0000039756 0.0000159913 -0.0000058659 -0.0000211365 0.0000315206 0.0000160962 0.0000243223 0.0000148602 0.0000210277 0.0000362039 -0.0000950936 -0.0000142951 0.0000668452 0.0000158676 0.0000053555 -0.0000086622 -0.0000106714 -0.0000046827 -0.0000032871 0.0000092925 0.0000083095 0.0000020604 -0.0000202045 -0.0001802279 -0.0002832117 0.0006213667 0.0001809131 -0.0006463622 -0.0000942940 -0.0000009499 0.0000694531 0.0000219792 -0.0000169070 0.0000897759 -0.0000121490 -0.0000234137 0.0000284799 -0.0000034321 -0.0000033935 0.0000001104 -0.0000085513 -0.0000059004 -0.0000020735 0.0000172217 -0.0000075974 -0.0000399061 0.0000615557 0.0000081996 -0.0000376021 -0.0000012876 -0.0000008231 0.0000002427 0.0000017020 0.0000019494 -0.0000014244 0.0000009187 -0.0000012074 0.0000002918 -0.0000040968 -0.0000007716 0.0000008895 0.0000034021 0.0000272448 -0.0000120132 0.0000251478 0.0000133285 -0.0000099340 -0.0000006467 0.0000024081 -0.0000007035 -0.0000043808 0.0000023898 -0.0000003703 0.0000041418 -0.0000362737 0.0000107364 0.0000369788 -0.0000251557 0.0000015932 0.0000010114 -0.0000000114 0.0000025119 -0.0000011139 0.0000000636 -0.0000022570 -0.0000009401 0.0000017820 -0.0000018124 -0.0000009527 -0.0000012621 0.0000000032 0.0000077064 -0.0000069385 0.0000100545 0.0000087196 0.0000085509 0.0000036986 0.0000019680 0.0000068190 -0.0000030913 -0.0000025686 0.0000006177 -0.0000051670 -0.0000187170 -0.0000794593 0.0000440325 0.0000216795 -0.0000101782 0.0000412529 -0.0231166712 -0.0446221809 0.0230843154 0.0207389250 0.2824638518 0.3837239697 0.3701963269 -0.1944905736 -0.0455904594 -0.1222392575 0.4324931494 -0.6093357187 -0.0039161245 0.0017034781 -0.0010958871 0.0330718003 -0.0191208987 0.0512779071 0.0174659911 0.0241528695 -0.0178757391 -0.0055387689 -0.0256886940 -0.0196737686 -0.0000200021 -0.0000041398 0.0000039749 -0.0000195084 0.0001044292 -0.0000280411 0.0000045699 -0.0000154850 0.0000050286 -0.0000200268 -0.0000026346 0.0000044688 0.0000906428 0.0000197852 -0.0000278048 0.0000867785 -0.0000310555 0.0001606639 -0.0000203493 -0.0000057319 -0.0000241963 0.0000193944 0.0000575772 -0.0000211434 0.0000078625 0.0000198398 -0.0000129859 -0.0001866046 -0.0004851498 0.0003472328 -0.0001859849 0.0000534699 -0.0000689301 -0.0001642270 -0.0001403935 -0.0000558405 0.0003447010 0.0001579536 -0.0001240412 -0.0002332044 -0.0002902609 -0.0000029295 -0.0000988377 -0.0000773982 0.0001171890 0.0002256257 0.0003963208 -0.0000007486 -0.0000344107 0.0000289612 -0.0000060639 -0.0000110124 -0.0000303890 -0.0000009486 -0.0000436790 0.0000054779 0.0000635886 0.0000239846 0.0000147744 -0.0000010096 0.0000232446 -0.0000108284 -0.0000173392 -0.0000466623 0.0000020759 0.0000498894 0.0000134719 0.0000249094 -0.0000206763 -0.0002936005 -0.0001035314 0.0000063356 -0.0000124662 -0.0000081835 -0.0000254616 0.0005030990 0.0001188064 -0.0002010083 0.0000643860 -0.0000407299 -0.0000945176 0.0000253300 -0.0000140261 0.0002218914 -0.0007144446 -0.0005398614 -0.0003409180 -0.0000094412 -0.0000001433 -0.0000174905 0.0000032198 0.0000039077 -0.0000011671 -0.0000112734 -0.0000266535 0.0000044543 -0.0000023176 -0.0000044686 0.0000010163 -0.0000091653 -0.0000085185 0.0000017227 -0.0000027513 -0.0000014149 0.0000004579 0.0002040236 0.0002646525 0.0000337028 -0.0000238322 -0.0000252940 0.0000023562 0.0000340498 0.0000894475 0.0000276926 0.0000398174 0.0000059738 0.0000003728 0.0000093171 -0.0000071892 0.0000154228 0.0005661503 0.0000170212 -0.0000131696 -0.0088210130 -0.0001873103 -0.0000009201 0.0000337200 -0.0000102646 -0.0000328608 -0.0000172891 0.0000318536 -0.0000535803 0.0001200447 -0.0001059532 -0.0000461218 -0.0000156351 0.0000271765 -0.0000709110 -0.0004672461 0.0008571124 0.0002175459 0.0355748621 -0.0306776718 0.0184403144 -0.0000663003 -0.0003920741 0.0000920539 -0.0009398650 -0.0053980233 -0.0058583013 -0.0000586092 0.0000030112 0.0000092345 -0.0000141986 -0.0000106073 -0.0000002359 -0.0671801496 0.2693014187 0.3882049054 -0.5537199194 -0.2419976411 -0.1761774824 0.2116289891 0.3222935186 -0.4275182788 -0.0022275415 0.0025047078 0.0002550478 0.0047214830 0.0014248369 -0.0003131759 -0.0009821001 -0.0011310397 -0.0020132645 -0.0564873896 0.0579670223 -0.0166514983 0.0850061646 0.0407369968 0.0044857300 -0.0177306269 -0.0373633849 0.0781418926 0.0000169159 0.0001304601 -0.0000748287 0.0000564214 0.0000134802 -0.0000289126 0.0001474623 -0.0000337378 0.0001429572 -0.0000057070 0.0000065061 -0.0000027974 -0.0000132341 0.0000463597 0.0000545604 -0.0000040134 -0.0000039490 -0.0000055953 0.0000111500 -0.0000043846 0.0000013298 -0.0000023422 -0.0000001374 -0.0000008511 -0.0000015976 -0.0000060983 -0.0000102565 0.0001699779 -0.0002778484 -0.0005350611 -0.0000111685 0.0000236097 0.0000353890 -0.0000269830 0.0000114835 0.0000115974 0.0000163356 -0.0000448268 -0.0000203105 0.0000591310 0.0000220262 0.0001043394 0.0000385233 0.0000687548 0.0002842084 -0.0000544205 -0.0000020937 -0.0000394331 0.0000035009 0.0000058768 0.0000087119 -0.0000057847 -0.0000029604 -0.0000052153 0.0000073736 0.0000095914 -0.0000106823 -0.0001887541 -0.0009094875 -0.0020830088 0.0000840725 0.0000101650 0.0000692579 -0.0000480515 -0.0000191200 -0.0000113548 -0.0000172615 0.0000139301 0.0000378110 -0.0000097784 -0.0000743575 0.0000262503 0.0000111343 -0.0000059923 -0.0000109410 0.0000087788 -0.0000003052 -0.0000016431 0.0000114417 0.0000086419 0.0000117683 0.0000224380 0.0000058783 -0.0000016729 -0.0000023682 -0.0000026205 0.0000015810 0.0000078126 0.0000059991 -0.0000025714 0.0000013193 -0.0000072390 0.0000023492 -0.0000066764 -0.0000025225 0.0000016779 0.0000044655 0.0000941971 -0.0000321802 0.0000381389 0.0000179021 -0.0000101556 -0.0000037159 0.0000000316 -0.0000001116 -0.0000047273 0.0000036558 -0.0000013677 0.0000169150 -0.0000243462 0.0000087051 0.0000469684 -0.0000352324 0.0000044192 -0.0000030132 -0.0000059843 0.0000081417 -0.0000112073 -0.0000085500 -0.0000143244 -0.0000027280 0.0000011945 -0.0000025084 -0.0000075185 -0.0000096344 -0.0000045284 0.0000213338 0.0000538647 -0.0000098373 0.0000489023 0.0000683901 0.0000383465 0.0000104072 0.0000263236 -0.0000135276 -0.0000088747 -0.0000024266 -0.0000191146 -0.0001006883 -0.0003026945 0.0001793948 0.0000442420 -0.0000293520 0.0001218498 0.0027855850 0.0052724486 -0.0027786983 -0.0025061938 -0.0333520071 -0.0452785583 -0.0440034987 0.0231359830 0.0054491734 0.0144251678 -0.0514786521 0.0724921349 -0.0038111582 0.0006111637 -0.0006161820 0.0263374663 -0.0151644159 0.0404528366 0.0183957440 0.0250204296 -0.0205596816 -0.0037110421 -0.0179081430 -0.0143701267 0.0000052856 0.0000017680 -0.0000005051 0.0000045600 -0.0000270025 0.0000087976 -0.0000013700 0.0000034305 -0.0000013663 0.0000054016 0.0000005010 -0.0000006804 -0.0000225988 -0.0000079262 0.0000062256 -0.0000172816 0.0000058645 -0.0000304567 0.0000039947 0.0000011430 0.0000046001 -0.0000033946 -0.0000096881 0.0000018181 -0.0000010265 -0.0000039731 0.0000037437 0.0000279105 0.0000846012 -0.0000585177 0.0000377016 -0.0000104435 0.0000132648 0.0000399592 0.0000281977 0.0000066831 -0.0000685265 -0.0000288252 0.0000267051 0.0000471509 0.0000478568 -0.0000106580 0.0000196846 0.0000151141 -0.0000248432 -0.0000472701 -0.0001113656 0.0000483307 -0.0000000395 0.0000034144 0.0000081415 0.0000019297 0.0000035395 -0.0000005567 0.0000040904 0.0000016978 -0.0000068625 -0.0000043385 -0.0000031005 0.0000002891 -0.0000029759 0.0000003823 0.0000016838 -0.0000036693 -0.0000019243 -0.0000015904 0.0000014296 0.0000012874 0.0000026646 0.0000499100 0.0000186805 0.0000036376 0.0000039870 0.0000012725 0.0000044938 0.0000318406 0.0000066255 -0.0000180138 -0.0000042548 0.0000103030 0.0000071644 0.0000047725 0.0000020470 -0.0000185118 0.0000285951 0.0000106618 0.0000154831 0.0000019033 0.0000016223 0.0000028594 0.0000015049 0.0000039932 -0.0000033635 -0.0000041504 -0.0000046330 0.0000001285 -0.0000064276 0.0000006666 -0.0000000534 -0.0000104010 -0.0000113696 -0.0000015647 -0.0000068230 -0.0000021533 0.0000037851 0.0000246978 0.0000376461 -0.0000070557 0.0000654217 -0.0000246261 -0.0000202635 0.0000605504 0.0000932241 0.0000117263 0.0000590935 0.0000003112 -0.0000359965 0.0000048755 -0.0000020344 -0.0000034366 -0.0000934789 -0.0000073040 -0.0000020408 0.0014191682 0.0000337299 0.0000405643 -0.0000078265 0.0000010118 0.0000056270 -0.0000364525 -0.0000129138 0.0000278579 0.0001307249 0.0000272716 -0.0000881502 -0.0002125336 -0.0000923355 0.0000233086 0.0001096912 0.0006723378 0.0008181151 -0.0054895409 0.0049588125 -0.0027462821 0.0002287576 0.0004628767 -0.0006124892 -0.0023529461 -0.0359356926 -0.0366605893 -0.0000344674 0.0000301848 0.0000457630 0.0001314043 0.0001189372 -0.0000019175 0.0118737959 -0.0455114560 -0.0637303382 0.0848628793 0.0374228788 0.0269616345 -0.0331237795 -0.0506382803 0.0671453838 0.0054879000 -0.0078297908 0.0006326067 -0.0100740557 -0.0028380811 0.0011756314 0.0015555248 0.0042671212 0.0034825149 -0.3814971420 0.3937352469 -0.1114770879 0.5251113068 0.2518707815 0.0277712331 -0.1144520466 -0.2354076050 0.5015954597 -0.0004238937 -0.0015259546 0.0012005188 0.0007181648 0.0000447136 -0.0000725735 -0.0018560517 -0.0002674085 -0.0014178701 -0.0000000725 -0.0000019453 -0.0000052959 0.0000043802 -0.0000067786 -0.0000103173 0.0000045118 0.0000061085 0.0000048738 -0.0000025748 0.0000002832 -0.0000075776 0.0000011060 0.0000034379 0.0000006882 -0.0000010290 0.0000031192 0.0000011843 -0.0000394986 0.0000633415 0.0001219746 -0.0000303454 -0.0000247007 -0.0000164989 0.0000019218 -0.0000073334 -0.0000144296 0.0000430029 0.0000068248 -0.0001021579 0.0000292672 0.0000005615 0.0000252602 -0.0000063105 -0.0000151437 -0.0000542299 0.0000133831 0.0000007662 0.0000035905 -0.0000018404 -0.0000011016 -0.0000008639 0.0000017873 0.0000006838 0.0000009222 -0.0000009072 -0.0000016051 0.0000013982 0.0000272438 0.0002112569 0.0004339135 -0.0000358913 -0.0000012915 0.0000120229 0.0000120973 0.0000056618 0.0000024408 0.0000017727 -0.0000013607 -0.0000153925 -0.0000049613 0.0000119148 -0.0000037324 -0.0000007701 0.0000038279 0.0000052236 0.0000023420 0.0000036220 0.0000036768 -0.0000030215 -0.0000027007 -0.0000026255 -0.0000056989 -0.0000021823 0.0000006414 0.0000006208 0.0000009124 -0.0000004887 -0.0000025527 -0.0000013549 0.0000007314 -0.0000004842 0.0000024187 -0.0000008572 0.0000025046 0.0000009297 -0.0000006805 -0.0000019825 -0.0000316930 0.0000119483 -0.0000166952 -0.0000076021 0.0000048022 0.0000011047 0.0000009879 -0.0000003528 0.0000015833 -0.0000012797 0.0000003687 -0.0000043229 -0.0000044050 -0.0000001214 -0.0000159797 0.0000115603 -0.0000015856 0.0000001822 0.0000010650 -0.0000020637 0.0000013495 0.0000010634 0.0000023645 0.0000006912 -0.0000002249 0.0000004507 0.0000025009 0.0000028379 0.0000017121 -0.0000078740 -0.0000082002 0.0000025326 -0.0000173570 -0.0000216306 -0.0000150060 -0.0000024183 -0.0000059398 0.0000025937 0.0000031733 0.0000003251 0.0000063318 0.0000190725 0.0000658828 -0.0000408463 -0.0000201261 0.0000100198 -0.0000488348 0.0000429513 0.0001231130 -0.0000464999 -0.0000624597 -0.0007922216 -0.0010627749 -0.0007942443 0.0004092174 0.0000795471 0.0003196501 -0.0010781299 0.0015029639 0.0007947614 -0.0001850343 0.0001456812 -0.0057486352 0.0033410815 -0.0088346170 -0.0037340860 -0.0050310833 0.0041418960 0.0008131024 0.0040935155 0.0032551624 0.0000072202 0.0000080943 -0.0000016573 -0.0000036067 0.0000038320 -0.0000073458 -0.0000036059 -0.0000035780 0.0000009330 0.0000079024 0.0000026980 -0.0000042453 -0.0000390548 -0.0000124526 0.0000089956 -0.0000467051 0.0000240440 -0.0000885560 0.0000102861 0.0000057281 0.0000156136 -0.0000137398 -0.0000299749 0.0000188761 0.0000029263 0.0000060408 0.0000111051 0.0001073521 0.0002356039 -0.0001088412 0.0001047320 -0.0000433207 0.0000197009 0.0000847559 0.0000429080 0.0000051572 -0.0001550157 -0.0000578926 0.0000811116 0.0000605264 -0.0000259503 -0.0000079311 0.0000377485 0.0000209769 -0.0000432064 0.0009397164 0.0006396414 0.0004813093 -0.0002256757 0.0003216620 0.0002188091 -0.0000456562 -0.0000715990 -0.0000171652 -0.0000213065 0.0000459261 0.0003519627 -0.0000030517 0.0000522850 0.0000102434 0.0000756395 -0.0000385003 -0.0000544568 -0.0000122803 -0.0000474217 0.0002367556 0.0001509229 0.0000494839 0.0000242777 -0.0000063023 0.0000386065 0.0000064967 -0.0000589099 -0.0000472441 -0.0000032342 0.0006034256 0.0001224960 -0.0001326009 0.0000913285 -0.0001394616 -0.0002724112 0.0001046866 -0.0002943971 0.0006037611 -0.0000325295 0.0007641668 -0.0004025047 -0.0000601682 0.0000492611 -0.0000249207 -0.0000037841 0.0000096911 0.0000034607 0.0000235299 -0.0000185257 -0.0000004939 -0.0000634656 -0.0000303473 0.0000179415 -0.0000035577 0.0000060572 0.0000052070 -0.0000047422 0.0000076914 0.0000036156 0.0000752505 0.0000867873 0.0000005942 0.0005780509 -0.0000621852 -0.0002794082 -0.0000575620 -0.0000744707 0.0000217698 0.0000308783 0.0000140188 0.0000122201 0.0000663408 -0.0001518802 -0.0000533516 0.0000859704 -0.0000134241 -0.0000528670 -0.0017083271 -0.0002493025 0.0003165399 0.0000708434 0.0000183964 -0.0000917908 0.0009021863 0.0008883282 -0.0001462400 -0.0003804224 -0.0016512550 -0.0006464495 0.0006507580 0.0004704420 -0.0000126499 -0.0001048933 0.0000211859 0.0000233821 -0.0041899098 0.0004890196 -0.0032664603 0.0000433959 0.0008994753 -0.0032845872 0.0001815048 -0.0001388875 0.0000187037 -0.0002701250 0.0002787634 0.0002536628 0.0002308000 0.0005587486 0.0004427785 0.0013791659 -0.0095202346 -0.0138676947 0.0581880889 0.0245055387 0.0176499668 -0.0161368607 -0.0245307119 0.0320092476 0.0213663189 -0.0304689594 0.0029009951 -0.0313888128 -0.0088563674 0.0029734121 0.0093245149 0.0263370915 0.0331533592 -0.0014838438 0.0013585609 -0.0005648272 0.0000081239 0.0000700792 0.0000278781 -0.0001580692 -0.0001143083 0.0005127303 -0.0015417872 -0.0075631821 0.0064922685 0.0072713748 -0.0000712772 -0.0028194339 -0.0088390508 0.0001653699 -0.0093598628 -0.0000061254 0.0000014371 -0.0000134645 0.0000077071 -0.0000000439 -0.0000073464 0.0000058585 0.0000116829 0.0000018801 0.0000123780 0.0000038610 -0.0000092887 -0.0000004768 0.0000031419 -0.0000134436 0.0000080687 0.0000075633 0.0000073373 -0.0000360050 0.0000309668 0.0000746588 -0.0000254630 -0.0000487184 0.0000102740 -0.0000091123 -0.0000071307 -0.0000213091 -0.0000201904 0.0000268800 0.0000540465 -0.0000593524 -0.0000177514 -0.0000578786 -0.0000571870 0.0000251867 0.0000062560 -0.0002748278 0.0000696681 0.0002521475 0.0000227091 0.0000200933 -0.0001044153 -0.0000816595 -0.0000388144 0.0000427988 0.0000255560 0.0000398165 0.0000865373 0.0002439102 0.0000564540 0.0006478329 0.0024388366 0.0005100891 -0.0020787032 -0.0002053978 -0.0000170053 0.0000216474 -0.0001135224 -0.0000496037 0.0000197322 0.0000698653 0.0000758745 -0.0000237317 0.0000003625 0.0000054701 0.0000062425 0.0000104183 0.0000071146 0.0000060625 0.0000390676 0.0000153041 0.0000142672 0.0000968169 0.0000468508 0.0000063346 0.0000020811 0.0000001450 -0.0000002861 0.0000017543 -0.0000053713 0.0000025622 -0.0000014765 -0.0000038269 0.0000015895 0.0000008332 -0.0000013361 0.0000000779 -0.0000012127 0.0000150380 -0.0000111194 0.0000129324 -0.0000027963 -0.0000066894 -0.0000018899 -0.0000063391 0.0000029417 0.0000055421 -0.0000019029 -0.0000000489 0.0000142028 0.0000905300 -0.0000443063 -0.0000343333 0.0000226315 -0.0000063212 -0.0000054043 -0.0000008425 -0.0000070443 0.0000042543 -0.0000013844 0.0000040092 0.0000020670 -0.0000028629 0.0000064174 -0.0000042965 -0.0000025719 -0.0000047251 0.0000003700 0.0000450015 -0.0000533183 0.0000260099 0.0000243468 0.0000135151 -0.0000020518 -0.0000082910 0.0000054592 -0.0000026030 -0.0000010887 -0.0000016644 0.0000318072 0.0000688274 -0.0000328002 0.0000218693 -0.0000134816 0.0000348316 0.0020877126 0.0030310208 -0.0020233394 -0.0018728128 -0.0188897340 -0.0249130840 -0.0290820107 0.0146001836 0.0038741930 0.0076275498 -0.0321891036 0.0444746937 -0.0517155481 0.0206413452 -0.0137589746 0.4239413514 -0.2349237414 0.6270856472 0.2414879966 0.2996118000 -0.2313256311 -0.0562644731 -0.3037939983 -0.2348370295 0.0000143166 0.0000079934 -0.0000131711 0.0000437949 -0.0002549563 0.0000905821 -0.0000103479 0.0000327704 -0.0000080896 0.0000302691 -0.0000021908 -0.0000082353 -0.0001893981 -0.0000064582 0.0000545242 -0.0000183109 0.0000101796 -0.0000308654 0.0000032262 0.0000058971 0.0000039310 -0.0000033814 -0.0000093263 0.0000043923 -0.0000001263 0.0000008670 0.0000048913 0.0000242164 0.0000745737 -0.0000395930 0.0000233113 -0.0000347297 -0.0000033532 -0.0001473685 0.0000157970 -0.0000082439 -0.0000354911 0.0000554621 0.0000516272 0.0000078604 0.0000722662 0.0000564250 0.0000152802 0.0000084361 -0.0000572122 0.0007282600 -0.0033323520 -0.0000860248 -0.0002240869 0.0002828372 0.0002237821 0.0000402704 0.0000007053 -0.0000238441 -0.0000153075 -0.0000514572 0.0000096523 -0.0000163320 -0.0000931229 -0.0000152236 -0.0000112316 -0.0000058612 0.0000061132 -0.0000441789 0.0000021162 0.0000456227 0.0001519781 0.0003715101 0.0000500863 0.0001438138 0.0000983260 -0.0000529147 -0.0001047479 -0.0001926774 -0.0000136929 0.0004464259 0.0000294408 -0.0002698872 0.0000342347 0.0002511174 0.0001127873 0.0001057586 -0.0000847284 -0.0001300235 -0.0000756605 0.0001207733 0.0001807693 -0.0000154058 -0.0000383516 0.0000130819 -0.0000089315 -0.0000379679 -0.0000178876 0.0000259215 0.0000499732 -0.0000208631 0.0007010222 0.0000467092 -0.0001435368 -0.0000655685 -0.0000751048 0.0000134002 0.0000148225 0.0000164321 -0.0000036937 -0.0001447536 -0.0004193957 -0.0000126962 -0.0063128217 0.0003750387 0.0029862796 0.0009054424 0.0015515694 -0.0001661006 0.0000356697 0.0000025439 0.0000047312 -0.0000515738 0.0002497751 0.0000707022 0.0002360051 -0.0001311747 -0.0001017478 -0.0053725060 -0.0004147073 0.0009025712 0.0000070958 0.0000017337 -0.0000065082 0.0000658303 0.0000840438 0.0001036956 -0.0000696935 -0.0002909023 -0.0001081910 0.0000682267 0.0001156524 -0.0000488164 0.0002505257 0.0002366219 -0.0008609665 -0.0004711218 0.0004634464 -0.0002118523 -0.0042640897 -0.0261977046 0.0433386336 0.0000241655 -0.0000569856 -0.0009680469 -0.0000533486 0.0000712591 0.0000561535 0.0001827286 0.0005200161 0.0003208609 0.0007543456 -0.0032522294 -0.0049148859 0.0064841449 0.0028274867 0.0018886889 -0.0027357892 -0.0052563301 0.0066773607 -0.3579178036 0.5118420408 -0.0440417773 0.5240147419 0.1459524396 -0.0525245813 -0.1173371183 -0.3510740849 -0.4057029830 -0.0032695099 0.0036494706 -0.0006309067 0.0052231607 0.0024204071 0.0001798975 -0.0028723374 -0.0050809280 0.0121392808 -0.0012672597 -0.0064480648 0.0052760324 0.0055243046 -0.0001486312 -0.0022087044 -0.0065241627 0.0000088139 -0.0069969448 -0.0000303182 -0.0000239230 0.0001786675 0.0000102462 -0.0000877034 0.0000498475 -0.0000988719 -0.0001024991 0.0000106870 -0.0001261111 -0.0001437921 0.0001272949 0.0000184589 -0.0000778637 0.0001927791 -0.0000183819 -0.0000997818 -0.0000378683 -0.0000618160 -0.0001117151 -0.0000682118 0.0001373669 0.0000784309 -0.0000709928 -0.0000841614 0.0000305312 0.0002452350 0.0001451305 -0.0002337587 -0.0006802908 0.0000217952 0.0000098341 -0.0000001474 -0.0000066258 0.0000012508 -0.0000008636 -0.0000206571 0.0000050213 0.0000220377 0.0000003916 0.0000008717 -0.0000099946 -0.0000057227 -0.0000021876 0.0000079439 -0.0000016650 0.0000018438 0.0000098055 0.0000227056 0.0000117739 0.0000439652 0.0002068494 0.0000451112 -0.0001809920 -0.0000097436 0.0000004234 -0.0000037706 -0.0000201574 -0.0000045933 -0.0000403524 0.0000362028 0.0000261878 -0.0000270039 0.0000470138 -0.0000405017 -0.0000828691 -0.0000267657 -0.0000303076 -0.0000459432 0.0000021825 0.0000002558 0.0000043763 0.0000038487 0.0000015392 0.0000029636 0.0000080960 0.0000008512 -0.0000012021 -0.0000058393 -0.0000055962 0.0000043414 -0.0000031831 0.0000078600 -0.0000032556 0.0000063663 0.0000011386 -0.0000009700 0.0000016098 -0.0001118012 0.0000456011 -0.0000183308 -0.0000115178 0.0000098521 0.0000018011 0.0000006445 -0.0000005482 0.0000066901 -0.0000036344 0.0000005949 -0.0000041034 0.0000199167 -0.0000119525 -0.0000647011 0.0000468364 -0.0000009285 -0.0000026793 -0.0000012766 -0.0000046921 0.0000003053 -0.0000003859 0.0000015968 0.0000011091 -0.0000011633 0.0000028017 0.0000032410 0.0000047297 0.0000018371 -0.0000128174 0.0000117844 -0.0000201058 -0.0000366202 -0.0000453764 -0.0000233982 -0.0000021569 -0.0000072262 0.0000034827 0.0000034165 -0.0000012756 0.0000074528 0.0000164675 0.0000788215 -0.0000403574 -0.0000312457 0.0000112566 -0.0000553462 0.0000152206 0.0001085226 -0.0000730706 -0.0000553768 -0.0004493816 -0.0005923525 -0.0004747846 0.0001367568 0.0000653172 0.0001996816 -0.0009365680 0.0012943288 -0.0028516255 0.0025627845 -0.0022161756 0.0321551521 -0.0176911120 0.0475579014 0.0061267583 0.0083937581 -0.0062949878 -0.0036717049 -0.0196264595 -0.0154545903 -0.0000012141 -0.0000014098 0.0000002980 0.0000024769 0.0000373448 -0.0000073972 0.0000000651 -0.0000036497 0.0000009763 -0.0000028300 0.0000007364 -0.0000007348 0.0000109773 0.0000023972 -0.0000025617 0.0000071942 -0.0000020583 0.0000103497 -0.0000019130 -0.0000016210 -0.0000012762 -0.0000012350 -0.0000019009 0.0000027688 0.0000022882 0.0000031544 -0.0000021645 0.0000078657 0.0000136715 0.0000039662 -0.0000118749 -0.0000014042 -0.0000034506 -0.0000108305 -0.0000112363 -0.0000015590 0.0000209350 0.0000155641 -0.0000123525 -0.0000289643 -0.0000148015 0.0000022518 -0.0000089283 -0.0000133909 0.0000106437 -0.0008676142 -0.0012807500 0.0001358636 0.0000737156 -0.0001142326 -0.0000833045 0.0000162402 0.0000493781 0.0000061953 0.0000455564 -0.0000221849 -0.0000523148 -0.0000152686 -0.0000362080 -0.0000022601 -0.0000269270 0.0000288241 0.0000285549 -0.0000033850 -0.0000290467 -0.0000091592 -0.0000034557 0.0000374719 0.0000197655 0.0002339515 0.0000774260 -0.0000943148 -0.0000956779 -0.0001911857 -0.0000056502 0.0000152864 -0.0000479825 -0.0000959446 -0.0000956048 0.0000875210 0.0001683104 -0.0000305130 0.0000377044 -0.0003897042 0.0012585143 0.0009086449 0.0004540657 0.0000524996 0.0000572674 0.0000418731 -0.0000295021 -0.0001081833 -0.0000979231 -0.0001546049 -0.0000579035 -0.0000009456 -0.0000402551 -0.0000169672 -0.0000455251 0.0000148245 -0.0000041202 -0.0000825455 0.0001323936 -0.0000368973 -0.0002101500 0.0007269237 0.0014807845 -0.0000574380 0.0005464575 0.0001040527 -0.0001260363 0.0002369364 0.0002775284 0.0000286662 -0.0021005164 -0.0000221075 0.0011738428 -0.0005523096 0.0012462465 0.0006956831 -0.0002447761 -0.0000371660 0.0000085138 0.0036924349 0.0002870502 -0.0001368542 0.0000045895 0.0000044768 0.0000032615 -0.0001975517 0.0001839871 0.0005693991 0.0027489469 -0.0003041274 -0.0013448537 -0.0005022458 -0.0006513164 -0.0002357330 -0.0000097065 0.0000606586 0.0000919073 0.0001006144 -0.0000661381 0.0001386342 0.0000346302 0.0003551150 -0.0005647143 0.0005616833 0.0001580834 0.0000045749 -0.0011479960 0.0014435867 0.0012857180 0.0115861210 0.0385168170 0.0246642411 0.0001490908 0.0000007035 0.0002225390 -0.0019849848 -0.0007551209 -0.0005917014 0.0007233572 0.0012410437 -0.0015006874 0.0047446867 -0.0067228963 0.0006642792 -0.0068109564 -0.0019253699 0.0007288180 0.0015093012 0.0043434020 0.0047759085 -0.0010519080 0.0003123482 0.0000917904 -0.0050955459 -0.0028026378 -0.0003625834 -0.0000663542 0.0002675438 -0.0002557161 -0.0843235456 -0.4554067840 0.3653599118 0.4042899903 -0.0159320923 -0.1637323647 -0.4590782845 -0.0011856509 -0.4978681544 0.0000008493 0.0000024553 0.0000002421 -0.0000051023 0.0000027581 -0.0000010049 0.0000094654 0.0000001819 0.0000043202 -0.0000004490 0.0000042146 -0.0000017540 -0.0000026867 0.0000048178 -0.0000000276 -0.0000032062 -0.0000022652 -0.0000065360 0.0000191503 -0.0000171275 -0.0000162238 -0.0000319973 0.0000196981 -0.0000544334 0.0000228897 0.0000198349 0.0000297360 0.0000067722 -0.0000299239 0.0000028741 0.0000423926 0.0000246198 0.0000676223 -0.0000050383 -0.0000029012 -0.0000022287 0.0000016063 0.0000006487 0.0000038519 -0.0000078601 -0.0000050024 -0.0000014022 0.0000029090 -0.0000003794 -0.0000099299 -0.0000038096 -0.0000019662 -0.0000039072 0.0000153961 0.0000164432 0.0000441860 0.0000470217 -0.0000358284 0.0000076226 0.0000315867 -0.0000011774 -0.0000052877 0.0000363547 0.0000034147 0.0000802407 0.0000196783 0.0000051571 -0.0000027094 -0.0000014587 -0.0000101649 -0.0000143274 -0.0000182297 -0.0000117408 -0.0000123411 -0.0000070749 0.0000032724 -0.0000008173 -0.0000188853 0.0000040283 0.0000042960 -0.0000001397 -0.0000004191 0.0000003984 0.0000011815 0.0000002117 0.0000000379 0.0000000337 -0.0000033348 0.0000010977 -0.0000026214 -0.0000010374 0.0000007193 0.0000030853 0.0000388380 -0.0000100916 0.0000224174 0.0000100466 -0.0000025815 -0.0000005888 -0.0000038206 0.0000009927 -0.0000011417 0.0000010885 -0.0000003292 0.0000013970 0.0000412278 -0.0000055139 0.0000138630 -0.0000083926 0.0000044981 0.0000001686 -0.0000004322 0.0000014592 0.0000005438 -0.0000001908 -0.0000010968 -0.0000004303 -0.0000042803 0.0000015256 -0.0000037778 -0.0000044184 -0.0000036393 0.0000060271 0.0000502262 -0.0000165657 0.0000282532 0.0000401668 0.0000279724 0.0000012724 0.0000018596 -0.0000003736 -0.0000027940 -0.0000001342 -0.0000051958 -0.0000077626 -0.0000290168 0.0000215904 0.0000156967 -0.0000097339 0.0000444589 -0.0004819635 0.0000162412 0.0001554894 -0.0002663142 0.0007082896 0.0009105968 0.0056007136 -0.0032970711 -0.0009842321 -0.0003352918 0.0016450735 -0.0023858015 0.0009182340 -0.0004597371 0.0001315870 -0.0077936079 0.0043943560 -0.0109796410 -0.0039753455 -0.0051302250 0.0040253237 0.0010308407 0.0067284879 0.0051552784 0.0000008774 -0.0000003882 -0.0000000192 0.0000028029 -0.0000168831 0.0000087098 0.0000000052 0.0000021830 -0.0000007031 0.0000005381 -0.0000001609 0.0000000601 -0.0000036045 -0.0000019233 0.0000011990 -0.0000000429 -0.0000009223 0.0000007543 -0.0000000751 0.0000001246 -0.0000000260 0.0000009982 0.0000029942 -0.0000023096 -0.0000000682 -0.0000004460 -0.0000007026 -0.0000139367 -0.0000342738 0.0000210008 0.0000024008 0.0000002615 -0.0000011046 0.0000034023 0.0000038711 -0.0000006980 -0.0000038470 -0.0000038671 0.0000049679 0.0000009367 0.0000029301 -0.0000061853 -0.0000013402 0.0000012215 -0.0000052753 0.0003150970 0.0004744673 0.0005673682 0.0000852694 -0.0002855187 -0.0002312830 -0.0000585984 0.0000006726 0.0000353991 -0.0000418990 0.0001864086 0.0000878649 -0.0000134219 0.0000508472 0.0000261694 0.0001229606 0.0000104357 -0.0000532606 -0.0011917706 -0.0002681834 0.0007898393 0.0000764419 -0.0000229405 -0.0000627509 0.0000155107 0.0000113316 0.0000147409 -0.0005956603 -0.0013172950 -0.0000432654 0.0124564417 0.0027568511 -0.0072915541 0.0000291205 -0.0001812549 -0.0002111501 0.0011689553 0.0014113639 0.0003963708 -0.0133262295 -0.0128144657 -0.0050100769 -0.0000913622 -0.0000681188 -0.0000324400 0.0000415074 -0.0000096690 -0.0000186090 -0.0002858192 -0.0005492619 0.0000485555 -0.0000196972 -0.0000480505 0.0000005146 -0.0000350416 0.0000111940 0.0000168016 0.0000210615 -0.0000126088 -0.0000277507 0.0036276387 0.0063677014 -0.0000725498 0.0005545837 0.0000247953 -0.0003027152 -0.0000301630 -0.0001314439 0.0000118023 -0.0006391226 -0.0000203702 0.0002827351 -0.0001829795 0.0003203870 0.0001722094 -0.0000835126 -0.0000111037 0.0000078586 0.0010613469 0.0000313749 0.0000276700 -0.0000033693 -0.0000008589 0.0000032489 -0.0004941320 -0.0009371077 0.0002626139 -0.0001945011 0.0002402626 0.0000915995 -0.0000152361 -0.0000727141 0.0000371417 0.0000154974 -0.0000038881 0.0000077338 0.0001596966 0.0001293679 -0.0000492122 -0.0000358880 -0.0000535504 -0.0000056416 -0.0000237492 0.0000234874 -0.0000227115 0.0000345699 -0.0002349404 -0.0002204618 0.0000181905 0.0001592520 -0.0000835447 0.0000395663 -0.0000516068 -0.0001039519 -0.0013907589 -0.0005571340 -0.0004900518 -0.0005649107 -0.0008603551 0.0011348367 -0.0002617111 0.0004047392 -0.0000419856 0.0005477375 0.0001305271 -0.0000403577 0.0000325144 0.0000467581 0.0001272184 0.0002106096 -0.0002117979 0.0000669374 0.0000992753 0.0000519792 0.0000020603 -0.0000458601 -0.0000970687 0.0001732016 -0.0003101536 -0.0020482212 0.0014671793 -0.0000373107 0.0000360131 0.0000783342 -0.0001303702 -0.0000233204 -0.0001585997 0.0000013489 -0.0000003828 0.0000011913 -0.0000009240 -0.0000024332 -0.0000035090 0.0000042800 0.0000004671 0.0000028101 -0.0000025851 0.0000008514 -0.0000001379 0.0000001239 0.0000020360 0.0000026898 -0.0000011630 0.0000000642 -0.0000009272 -0.0000063654 0.0000226795 0.0000354136 -0.0000294751 -0.0000069301 -0.0000287994 0.0000079004 0.0000011823 0.0000043518 0.0000053592 -0.0000224690 -0.0000182519 0.0000074729 0.0000008624 0.0000099787 0.0000069859 -0.0000006534 -0.0000121782 -0.0000382557 -0.0000126356 0.0000284103 0.0000032471 -0.0000000372 0.0000001464 0.0000026223 -0.0000001853 -0.0000086202 0.0000009698 -0.0000010752 -0.0000056511 -0.0000253211 0.0000291492 0.0001177108 0.0002980522 0.0001333683 -0.0002383119 0.0000009652 0.0000100062 0.0000234401 0.0000208661 0.0000152892 0.0000648426 -0.0000152682 -0.0000045969 0.0000138553 -0.0000015918 -0.0000006465 -0.0000011499 -0.0000044317 -0.0000015423 -0.0000021607 -0.0000022653 -0.0000074304 -0.0000128818 0.0000021747 0.0000011803 -0.0000126733 -0.0000000534 0.0000003146 -0.0000000963 -0.0000010986 0.0000001481 0.0000001528 0.0000001042 0.0000011837 -0.0000004469 0.0000009317 0.0000006584 -0.0000004057 0.0000008740 -0.0000132541 0.0000075635 -0.0000081643 -0.0000041818 0.0000052278 0.0000005601 -0.0000024690 0.0000004812 0.0000009510 -0.0000007493 0.0000000540 -0.0000052052 0.0000237980 -0.0000020684 -0.0000112453 0.0000062292 0.0000009929 0.0000003783 0.0000003392 0.0000001283 0.0000000539 0.0000003447 -0.0000003036 -0.0000008983 -0.0000039404 0.0000010645 0.0000002611 0.0000000800 0.0000000674 0.0000094345 0.0000379557 -0.0000104415 -0.0000034891 -0.0000050659 0.0000002203 0.0000000800 0.0000004637 -0.0000008275 0.0000004391 0.0000001496 0.0000000459 -0.0000053674 -0.0000079941 0.0000041435 -0.0000030609 -0.0000023627 -0.0000003922 0.0395042537 -0.0091116602 0.0812356655 -0.0235419627 -0.4159344873 -0.5321768220 -0.3408614241 0.1754068447 0.0582533002 -0.0935015092 0.3615800107 -0.4942402997 -0.0006600511 -0.0008249166 0.0008397588 -0.0039433958 0.0013279594 -0.0037023058 0.0078102016 0.0086163750 -0.0074184924 0.0007258459 -0.0002433421 0.0005944788 0.0000212821 0.0000122421 -0.0000038231 0.0000083312 -0.0003377136 0.0001244157 -0.0000055016 0.0000357566 -0.0000124005 0.0000277971 0.0000009628 0.0000004637 -0.0001375147 -0.0000532823 0.0000308274 -0.0000418827 0.0000174592 -0.0000657129 0.0000070399 -0.0000030923 0.0000058376 -0.0000258381 -0.0000704535 0.0000261785 0.0000123175 -0.0000000910 0.0000130167 0.0002207656 0.0007556895 -0.0004395870 0.0000932218 -0.0000400152 0.0000229052 0.0001189019 0.0000800963 -0.0000570004 -0.0001471819 -0.0000464889 0.0001209641 0.0000278358 0.0000854355 0.0000169228 0.0000265272 0.0000289731 -0.0000826329 -0.0002021913 -0.0005477479 0.0001373900 0.0000118834 -0.0000237614 0.0000070498 -0.0000092814 0.0000196021 0.0000022230 0.0000242122 0.0000242809 0.0000626072 -0.0000419448 -0.0000155057 0.0000139321 0.0000159231 0.0000111034 -0.0000018896 -0.0000431423 -0.0000493084 0.0000696305 0.0000620271 0.0000418093 0.0000139354 0.0004780167 0.0001560677 -0.0001507873 -0.0001259592 -0.0002700248 0.0000118017 0.0004291648 0.0000991462 -0.0003221513 -0.0000115247 0.0000378732 -0.0000189729 -0.0000544301 -0.0000215688 -0.0000677101 0.0006511440 0.0007219231 0.0001732787 -0.0000011467 0.0000058652 0.0000115572 0.0000007396 -0.0000093139 -0.0000021736 -0.0000077930 -0.0000215453 0.0000003272 -0.0000083782 0.0000007656 -0.0000017874 0.0000036248 0.0000015679 -0.0000027870 0.0000118821 0.0000017237 -0.0000063786 0.0000795827 0.0001767643 -0.0000067011 0.0001398746 0.0000461360 -0.0000230839 0.0000166517 -0.0000282666 -0.0000148199 -0.0001729209 -0.0000077594 0.0000661686 -0.0000165195 0.0000352545 0.0000121142 -0.0003325333 -0.0000421889 -0.0000073249 0.0050009926 0.0001349742 0.0000725674 0.0000053444 0.0000273035 0.0000239491 0.0001620751 0.0000282503 0.0000202245 -0.0000790992 0.0000425289 -0.0001042289 -0.0001821508 -0.0000677498 0.0000328794 0.0005151882 0.0002112092 -0.0000715249 0.0667340800 0.0604339018 -0.0073757534 -0.0004822909 -0.0006387996 -0.0002887879 -0.0111270283 -0.0049643300 0.0053241485 -0.0000026544 -0.0000287199 0.0000129796 -0.0000214638 0.0000600857 0.0000030525 0.0439161839 -0.1146577270 -0.1733659894 -0.6352864608 -0.2630053994 -0.2116161913 -0.2138678836 -0.3470859399 0.4704505088 -0.0008607058 0.0007745685 0.0002063109 0.0055590237 0.0011353280 -0.0006256102 0.0014132214 0.0037708861 0.0047579623 0.0193141064 -0.0231045013 0.0065484228 0.0968536734 0.0473559274 0.0073469278 0.0160357307 0.0345319039 -0.0768660729 -0.0000543551 -0.0006234851 0.0004918615 0.0004604381 -0.0000324264 -0.0002121573 -0.0001412152 0.0000808899 -0.0002319908 0.0000053505 -0.0000059842 0.0000076296 0.0000067618 -0.0000345997 -0.0000388230 0.0000110560 0.0000022042 0.0000082445 -0.0000135443 0.0000039589 -0.0000007580 0.0000065910 -0.0000015457 0.0000036704 -0.0000122311 -0.0000001919 -0.0000086042 -0.0001227240 0.0002835680 0.0004150174 -0.0000707504 -0.0000366960 -0.0000885320 0.0000319158 -0.0000067274 0.0000000318 0.0000011313 0.0000152315 -0.0000000587 0.0000812249 0.0000163280 0.0000794675 -0.0000374300 -0.0000435734 -0.0001332698 0.0000181860 0.0000007846 0.0000282067 -0.0000083249 -0.0000057878 -0.0000116470 0.0000056217 0.0000018617 -0.0000004934 -0.0000210366 -0.0000126457 0.0000144747 0.0003602940 0.0004739109 0.0009742860 0.0000621554 -0.0000230409 -0.0002023921 0.0000110158 0.0000093242 0.0000073103 0.0000083666 0.0000075254 0.0000508301 0.0001433618 0.0000947942 -0.0000986702 -0.0000103143 0.0000038372 0.0000052736 -0.0000140885 -0.0000019864 -0.0000034283 -0.0000046439 -0.0000025520 -0.0000042004 -0.0000096020 0.0000108908 0.0000058536 0.0000050341 0.0000030091 -0.0000016911 -0.0000102607 -0.0000068961 0.0000046067 -0.0000022042 0.0000223878 -0.0000086336 0.0000126728 0.0000040767 -0.0000035432 -0.0000095549 -0.0002715206 0.0001083622 -0.0000776407 -0.0000347798 0.0000259506 0.0000038681 -0.0000052558 0.0000012916 0.0000157597 -0.0000107576 0.0000015953 -0.0000169914 0.0000854833 -0.0000259313 -0.0001661093 0.0001162665 -0.0000117326 -0.0000117894 0.0000022407 -0.0000131074 0.0000002183 -0.0000020185 0.0000087273 0.0000001348 0.0000066026 0.0000009653 0.0000117459 0.0000136864 0.0000114046 -0.0000163227 -0.0000644354 0.0000100342 -0.0001037537 -0.0001323496 -0.0000785949 -0.0000118069 -0.0000359596 0.0000129539 0.0000105719 0.0000007966 0.0000188677 0.0000954010 0.0004099653 -0.0002190556 -0.0000567986 0.0000302838 -0.0001248272 0.0003159166 -0.0004114221 -0.0005672094 0.0001008000 0.0037255160 0.0050563959 -0.0034652550 0.0018549346 0.0003446135 0.0002582059 -0.0011409700 0.0014004226 -0.0007555288 -0.0014242201 0.0125611711 -0.0375999401 0.0196257599 -0.0544004257 0.0560638317 0.0651892241 -0.0476332310 -0.0104304814 -0.0664932673 -0.0468882694 0.0000102185 0.0000023166 -0.0000020068 0.0000055146 -0.0002182632 0.0000801852 -0.0000017574 0.0000238269 -0.0000087829 0.0000126206 -0.0000010024 -0.0000012977 -0.0000604872 -0.0000186378 0.0000153564 -0.0000346504 0.0000123174 -0.0000567712 0.0000075099 0.0000028116 0.0000113164 -0.0000009731 -0.0000034261 -0.0000018609 0.0000008952 -0.0000034556 0.0000063008 -0.0000015255 0.0000202255 -0.0000083894 0.0000871535 -0.0000197800 0.0000079476 0.0000604944 0.0000554591 0.0000032423 -0.0001350150 -0.0000761511 0.0000946089 -0.0001031327 -0.0000336413 -0.0000533158 0.0000151236 0.0000227706 -0.0000608994 0.0003717285 -0.0004718282 0.0005884791 0.0001666768 -0.0003156487 -0.0001087901 -0.0000929869 0.0000390177 0.0000232276 0.0000506370 0.0001603475 0.0004780759 -0.0000913291 0.0000006567 0.0000382362 0.0001240485 0.0000661440 -0.0000453897 -0.0001212288 -0.0002167026 0.0002880361 0.0002916943 0.0001466024 0.0000317700 0.0009191913 0.0003048496 -0.0003493032 -0.0006364141 -0.0013899483 0.0000516490 0.0011612883 0.0003019764 -0.0008589017 0.0000631864 0.0000022991 -0.0003766625 -0.0003184152 -0.0000026357 0.0001891314 0.0010558074 0.0015915491 0.0001925956 -0.0000107627 -0.0000246893 -0.0000121442 0.0000016135 -0.0000182472 -0.0000037299 -0.0000299111 -0.0000507145 0.0000081469 0.0000481447 0.0000141707 -0.0000300049 0.0000039285 -0.0000112985 -0.0000043934 0.0000286745 -0.0000018866 -0.0000135276 0.0002203000 0.0004674806 -0.0000193631 -0.0003748791 0.0001014507 0.0002505658 0.0000933237 0.0000772140 -0.0000288111 -0.0003602884 -0.0000163888 0.0001511895 -0.0000554357 0.0001179785 0.0000468898 -0.0004179449 -0.0001018858 -0.0000570335 0.0056230651 0.0001161326 0.0001569932 -0.0000264900 0.0000018945 0.0000490953 0.0009012679 0.0000571377 -0.0002744397 -0.0000518929 0.0001848979 -0.0003749156 0.0000159708 -0.0001906890 -0.0000947510 0.0000264112 -0.0000645752 -0.0000068883 -0.0092701790 -0.0089341019 -0.0012509440 -0.0015030350 -0.0038309189 -0.0012744313 0.0028261288 0.0015893156 -0.0016645152 0.0000274011 -0.0000727700 0.0000332941 -0.0000644730 0.0001828771 -0.0002139931 -0.0092777507 0.0277346254 0.0385444918 0.0975131166 0.0410071585 0.0319793287 0.0250224406 0.0411857285 -0.0554502388 -0.0151906349 0.0218860876 -0.0019588359 0.0261299874 0.0066842548 -0.0032652158 0.0057843733 0.0145835169 0.0207822966 -0.0033463892 0.0043054504 -0.0012042386 -0.0258822904 -0.0127672946 -0.0020822815 -0.0048647829 -0.0103259031 0.0232743236 -0.0004134136 -0.0023966406 0.0017294479 0.0001805229 -0.0000028284 -0.0000766987 0.0010686377 0.0000215834 0.0011858151 0.0000019866 -0.0000058887 0.0000105674 0.0000027307 -0.0000260270 -0.0000275699 0.0000164101 0.0000020743 0.0000126109 -0.0000171167 -0.0000028813 0.0000026871 0.0000054825 -0.0000042545 0.0000117700 -0.0000076602 -0.0000015877 -0.0000045837 -0.0000839720 0.0001922171 0.0003039343 -0.0001244580 -0.0000413705 -0.0001354445 0.0000295908 0.0000002491 0.0000182424 0.0000081974 -0.0000034095 -0.0000139904 0.0000382183 0.0000085234 0.0000333635 0.0000555303 -0.0000045438 0.0000514129 0.0002077161 -0.0000177562 -0.0002291272 0.0000118807 0.0000216836 0.0000670208 0.0000471585 0.0000170286 -0.0000343932 -0.0000247157 -0.0000253514 -0.0000311686 -0.0002175161 -0.0001883267 -0.0009295414 -0.0024216844 -0.0003994216 0.0017448580 -0.0001197501 0.0000391809 0.0001094016 0.0000727858 0.0000457960 0.0001850424 0.0000769549 0.0000475946 -0.0000726306 -0.0000075453 -0.0000007383 -0.0000029289 -0.0000177625 -0.0000055999 -0.0000079658 0.0000076224 -0.0000246797 -0.0000533984 0.0000519267 0.0000478425 -0.0000236311 0.0000016050 0.0000012502 -0.0000012399 -0.0000061468 -0.0000024443 0.0000013918 -0.0000006756 0.0000163199 -0.0000068062 0.0000092992 0.0000034978 -0.0000033269 -0.0000066376 -0.0001891436 0.0000728034 -0.0000755898 -0.0000331493 0.0000207445 0.0000029760 0.0000006906 -0.0000016270 0.0000076115 -0.0000063868 0.0000005381 -0.0000186389 -0.0000039804 0.0000075810 -0.0000904812 0.0000603953 -0.0000099009 -0.0000000784 0.0000022389 -0.0000045213 0.0000004943 0.0000003842 0.0000017623 0.0000010418 0.0000000871 -0.0000004828 0.0000073441 0.0000077873 0.0000043302 -0.0000075765 -0.0000242618 0.0000122376 -0.0000707171 -0.0000845797 -0.0000524787 -0.0000018072 -0.0000069317 0.0000016806 0.0000045559 -0.0000009095 0.0000068093 0.0000130639 0.0000874483 -0.0000490391 -0.0000296193 0.0000140788 -0.0000611265 0.0020405445 -0.0023243741 -0.0022570133 0.0004355084 0.0166050774 0.0227094958 -0.0207565150 0.0111942198 0.0022500608 0.0009281060 -0.0021889462 0.0024728467 -0.0014261658 -0.0201660638 0.0862473055 -0.3127883058 0.1680559056 -0.4510589623 0.3751684884 0.4405950447 -0.3195299654 -0.0601408653 -0.3628817967 -0.2551034156 -0.0000026010 -0.0000050018 0.0000016940 0.0000061543 0.0000968622 -0.0000387914 0.0000023194 -0.0000075477 0.0000031335 -0.0000062083 -0.0000002656 0.0000005347 0.0000360353 0.0000129307 -0.0000095846 0.0000050487 -0.0000034396 0.0000088779 -0.0000015646 -0.0000003129 -0.0000008770 0.0000052584 0.0000164585 -0.0000080952 -0.0000028178 -0.0000012763 -0.0000016530 -0.0000496616 -0.0001791512 0.0000993864 -0.0000124157 0.0000120653 -0.0000028552 -0.0000170293 -0.0000028128 0.0000198572 0.0000113674 -0.0000093022 -0.0000174562 -0.0000005947 -0.0000052038 -0.0000042836 0.0000002677 0.0000033435 0.0000122424 0.0002692406 0.0004932731 -0.0000561926 -0.0000071942 0.0000105847 0.0000056205 -0.0000054774 -0.0000114431 -0.0000004388 -0.0000080589 0.0000085696 0.0000180963 0.0000137188 0.0000137109 -0.0000032531 0.0000064297 -0.0000049722 -0.0000061482 0.0000097391 0.0000050689 -0.0000024174 -0.0000028631 -0.0000182650 -0.0000053920 -0.0001693567 -0.0000511786 0.0000647311 0.0000204150 0.0000454269 0.0000001518 -0.0001088109 -0.0000093058 0.0000791798 0.0000142602 -0.0000388424 -0.0000391342 -0.0000033176 0.0000119031 0.0000820412 -0.0003478993 -0.0003157749 -0.0001206629 -0.0000004562 -0.0000087688 -0.0000095721 0.0000028314 -0.0000041509 -0.0000035734 0.0000033250 0.0000131924 0.0000004575 0.0000306842 0.0000077388 -0.0000084352 -0.0000141535 -0.0000259760 0.0000016534 0.0000166200 -0.0000001739 -0.0000106553 -0.0000311804 -0.0000770492 0.0000149281 -0.0003780160 -0.0000274748 0.0001562430 0.0001237464 0.0002591584 -0.0000118294 -0.0001399981 -0.0000026870 0.0000860148 -0.0000108427 0.0000202705 0.0000276353 0.0000987706 0.0000180307 -0.0000001001 -0.0014857736 -0.0001112111 -0.0000011535 -0.0000037973 -0.0000065504 -0.0000029435 -0.0000086674 -0.0000451388 -0.0000910682 0.0000560121 0.0001624722 0.0001265352 0.0002423487 0.0000911314 0.0000041193 -0.0006655859 -0.0003037856 0.0001009145 -0.0098826627 -0.0088924472 0.0004052466 0.0020079019 -0.0008775269 -0.0000581475 -0.0830124202 -0.0264931960 0.0283512641 0.0000343476 -0.0000542473 -0.0000651546 -0.0004927236 0.0003687162 0.0000109224 -0.0064803982 0.0186172309 0.0274012164 0.0977326154 0.0400244244 0.0323997988 0.0293651330 0.0488246855 -0.0651282826 -0.0107256533 0.0151640050 -0.0013992261 -0.0128198075 -0.0040603942 0.0011534334 0.0005604982 -0.0005171949 -0.0003648589 0.2038412991 -0.2290919986 0.0611575472 0.7023229473 0.3490696898 0.0534741924 0.0916003445 0.1999561147 -0.4533808051 -0.0004956991 -0.0037585703 0.0030312517 0.0058592886 -0.0003173516 -0.0027400486 0.0007886297 0.0001952029 0.0000221877 0.0000046275 -0.0000046032 -0.0000103886 0.0000055035 -0.0000016905 0.0000001645 -0.0000103985 -0.0000005811 -0.0000054605 -0.0000005827 -0.0000090453 -0.0000014625 -0.0000119401 0.0000206930 0.0000237781 0.0000238858 0.0000086979 0.0000258088 -0.0000044037 0.0000375148 0.0000191545 0.0000720923 0.0000376616 0.0000787936 -0.0000356002 -0.0000042901 -0.0000116980 0.0000950438 -0.0001581672 -0.0003009999 -0.0001898425 -0.0000656028 -0.0002542551 0.0000106190 0.0000109201 0.0000290376 0.0000019546 -0.0000025036 -0.0000134546 0.0000055558 0.0000038923 0.0000055487 -0.0000004584 0.0000006619 0.0000023343 0.0000041723 0.0000023704 -0.0000024548 -0.0000728419 -0.0001253063 -0.0002711925 -0.0000987067 -0.0000043577 0.0000847992 -0.0000173517 -0.0000026303 0.0000032831 -0.0000031954 -0.0000059722 -0.0000343721 -0.0000266965 -0.0000241382 0.0000128347 0.0000085835 -0.0000002129 0.0000060581 0.0000181382 0.0000056255 0.0000085556 0.0000035727 0.0000000326 -0.0000003890 0.0000097104 0.0000004442 -0.0000034295 -0.0000018526 -0.0000009374 0.0000003219 0.0000026100 0.0000020505 -0.0000018137 0.0000012610 -0.0000090764 0.0000035968 -0.0000080718 -0.0000021678 0.0000022660 0.0000066508 0.0001155399 -0.0000477124 0.0000618577 0.0000277561 -0.0000215231 -0.0000004992 0.0000096276 -0.0000028073 -0.0000079925 0.0000044518 -0.0000003074 0.0000049107 -0.0001193073 0.0000344710 0.0000735624 -0.0000509129 0.0000046412 0.0000027738 0.0000003903 0.0000026966 -0.0000001949 0.0000003766 -0.0000008287 0.0000002327 0.0000063223 -0.0000036010 -0.0000027974 -0.0000035804 -0.0000009281 -0.0000001948 -0.0000687216 0.0000361576 0.0000345311 0.0000357200 0.0000216156 0.0000025580 0.0000104891 -0.0000043458 -0.0000036893 0.0000011025 -0.0000065947 -0.0000238801 -0.0001180556 0.0000606867 0.0000344242 -0.0000154189 0.0000620947 0.0001111238 -0.0000968954 -0.0000630253 0.0000337341 0.0004918640 0.0006608598 -0.0011687439 0.0006357362 0.0001682867 -0.0000041896 0.0000162112 -0.0000260718 -0.0000011182 -0.0005916539 0.0015389601 -0.0064429375 0.0035089567 -0.0092408429 0.0067564968 0.0081231925 -0.0058589097 -0.0008295170 -0.0045366990 -0.0031609276 -0.0000023236 0.0000038693 -0.0000013755 -0.0000090314 0.0000752884 -0.0000276361 -0.0000010057 -0.0000104701 0.0000034775 0.0000001249 0.0000006426 -0.0000004349 0.0000021622 -0.0000011930 -0.0000016754 -0.0000030994 0.0000009506 -0.0000069107 0.0000019369 0.0000041142 0.0000002657 -0.0000026916 -0.0000087585 0.0000059929 -0.0000009226 0.0000003524 0.0000004013 0.0000263548 0.0000794908 -0.0000579381 0.0000052141 -0.0000056618 0.0000052746 0.0000109879 -0.0000098037 -0.0000014461 -0.0000009719 0.0000115376 -0.0000056983 0.0000021125 -0.0000173076 0.0000109098 0.0000015702 -0.0000086111 0.0000075575 -0.0000847363 -0.0000923411 0.0000464227 -0.0000273966 0.0000405966 0.0000213612 0.0000029682 -0.0000045187 -0.0000023682 -0.0000050860 -0.0000012367 0.0000012069 0.0000012972 -0.0000021834 -0.0000003474 -0.0000025972 -0.0000075291 -0.0000005229 0.0000053209 0.0000036611 -0.0000038826 0.0000030155 0.0000107189 -0.0000004018 -0.0000070562 0.0000023060 -0.0000009105 0.0000325283 0.0000695651 0.0000006552 -0.0000551708 -0.0000112767 0.0000274034 0.0000050178 0.0000057342 0.0000008593 -0.0000095869 -0.0000048595 -0.0000096078 0.0001120229 0.0001132761 0.0000244716 0.0000042270 0.0000082560 -0.0000016206 0.0000001134 0.0000139977 0.0000065251 -0.0000096383 -0.0000140290 0.0000032577 -0.0000321803 -0.0000008845 0.0000091674 -0.0000132570 -0.0000229748 0.0000025604 -0.0000072131 -0.0000021053 0.0000021181 0.0000784187 0.0001485731 -0.0000116526 0.0003670486 0.0000430746 -0.0000524230 0.0002009138 0.0002339452 -0.0000162551 0.0000421496 -0.0000046563 -0.0000201008 0.0000919604 -0.0001953187 -0.0000673404 0.0000131852 -0.0000080653 -0.0000028627 -0.0002538411 0.0000380017 0.0000109798 0.0000016533 0.0000004745 -0.0000006629 -0.0000150547 0.0000032873 0.0000071492 0.0000396291 -0.0000027439 -0.0000169317 0.0000238886 -0.0001040633 0.0000984236 -0.0002333429 0.0003957104 -0.0003658992 0.0015031060 0.0009322607 -0.0015139514 0.0020280912 -0.0005671481 -0.0002587817 -0.0396358896 0.0611377314 -0.0584467163 -0.0000076526 -0.0000038908 0.0000063464 -0.0000401835 -0.0001446033 0.0003483146 -0.0007665395 0.0037129677 0.0047183692 -0.0085901262 -0.0039379609 -0.0034353969 -0.0078738903 -0.0135714048 0.0174860688 -0.0061406507 0.0087383328 0.0002234507 -0.0185037294 -0.0055116779 0.0019335410 0.0014939631 0.0024114846 0.0032867165 0.5147689928 -0.5403927250 0.1330844201 0.0940372923 0.0563129291 -0.0004368914 -0.1328938483 -0.2491768156 0.5687818734 0.0007453661 0.0018342152 -0.0013655561 0.0019505322 -0.0002242066 -0.0006358864 -0.0021979214 0.0001728082 -0.0022299786 -0.0000069287 0.0000077003 -0.0000051227 -0.0000010688 0.0000115651 0.0000087284 0.0000056507 0.0000007873 0.0000023543 0.0000092740 -0.0000021921 0.0000082616 0.0000034979 -0.0000184794 -0.0000298982 0.0000020811 -0.0000001471 -0.0000089264 0.0000303789 -0.0000952893 -0.0001134961 -0.0000186547 -0.0000063593 -0.0000132555 -0.0000004789 0.0000177390 0.0000457081 -0.0001349139 0.0001850360 0.0003308313 -0.0000067403 0.0000114698 0.0000386884 -0.0000001740 0.0000035507 0.0000095210 -0.0000033469 0.0000000503 0.0000029169 0.0000013102 0.0000004678 -0.0000004865 -0.0000008741 -0.0000008887 -0.0000001774 -0.0000006104 0.0000003368 0.0000021460 0.0000084264 -0.0000646943 -0.0001327822 0.0000176728 0.0000002953 -0.0000332570 -0.0000042023 -0.0000028810 -0.0000044498 -0.0000055708 0.0000085535 0.0000175956 0.0000131042 0.0000092336 -0.0000099113 0.0000049602 -0.0000052755 -0.0000241259 -0.0000093842 -0.0000071050 -0.0000128785 0.0000015002 0.0000016034 0.0000030894 0.0000019195 -0.0000001990 0.0000010885 0.0000005570 0.0000001237 0.0000002363 0.0000016054 -0.0000006885 0.0000009518 -0.0000007325 -0.0000029444 0.0000012864 0.0000019003 -0.0000001372 -0.0000001953 -0.0000019310 0.0000227921 -0.0000088903 -0.0000120717 -0.0000077030 0.0000042642 -0.0000016051 -0.0000184446 0.0000066120 0.0000031781 0.0000001120 -0.0000003024 0.0000046156 0.0002139319 -0.0000686336 -0.0000107848 0.0000067101 -0.0000021607 -0.0000016338 -0.0000017554 -0.0000022168 -0.0000002768 -0.0000000053 0.0000003057 -0.0000005734 -0.0000020286 0.0000018900 0.0000018717 0.0000036847 0.0000018795 0.0000096821 0.0000391533 -0.0000292391 -0.0000164720 -0.0000282654 -0.0000201016 -0.0000033487 -0.0000110587 0.0000057973 0.0000030979 -0.0000006717 0.0000073784 0.0000306011 0.0001106897 -0.0000641620 -0.0000240524 0.0000087915 -0.0000618811 0.0000091607 -0.0000038399 -0.0000472224 -0.0000024674 0.0001652522 0.0002161738 -0.0001832016 0.0000958138 0.0000190787 0.0000394693 -0.0002287400 0.0002864776 -0.0000336969 0.0001324520 -0.0005926653 0.0023831619 -0.0013741043 0.0034464832 -0.0023369721 -0.0026686915 0.0018972327 0.0004217949 0.0023857497 0.0017054691 0.0000011518 -0.0000011223 0.0000001749 0.0000046921 -0.0000188825 0.0000059814 0.0000003382 0.0000027383 -0.0000008705 0.0000010194 -0.0000009038 0.0000012126 -0.0000024905 -0.0000014715 0.0000008383 -0.0000003272 -0.0000016447 0.0000024791 0.0000000773 -0.0000000047 -0.0000003701 0.0000028956 0.0000068112 -0.0000057333 -0.0000016726 -0.0000030742 0.0000002484 -0.0000271628 -0.0000596976 0.0000304216 0.0000003029 0.0000057230 0.0000004664 0.0000040367 0.0000070941 0.0000012100 -0.0000016037 -0.0000081477 -0.0000001595 0.0000241262 0.0000196303 -0.0000047249 0.0000013472 0.0000061652 -0.0000029758 -0.0004760593 -0.0007836042 0.0000454585 0.0000702797 -0.0000169704 0.0000313132 0.0000222676 0.0000106086 -0.0000089547 0.0000031541 -0.0001635487 -0.0000762106 0.0000167458 -0.0000185155 -0.0000183772 -0.0001558101 -0.0000791176 0.0000508693 0.0017117503 0.0004136970 -0.0010647670 -0.0000579181 -0.0000077425 0.0000384384 -0.0001750039 -0.0000448431 0.0000918564 0.0010491748 0.0021684621 0.0001317417 -0.0185466892 -0.0043854048 0.0108365410 -0.0000105735 0.0000530763 0.0000619850 -0.0008951161 -0.0009597249 -0.0000683192 0.0109536263 0.0110820994 0.0005693644 0.0000758996 0.0001507854 -0.0000762092 0.0000429010 0.0000017630 -0.0000208849 -0.0009930912 -0.0018259236 0.0001879766 -0.0000161977 -0.0000245143 -0.0000001696 -0.0000207534 0.0000310680 0.0000155535 0.0001706229 0.0000452205 -0.0000863071 0.0118341557 0.0199288457 -0.0013184765 -0.0000353444 -0.0000392578 -0.0000538752 -0.0000704691 -0.0001461269 0.0000299014 -0.0028191431 -0.0000822396 0.0011418718 -0.0001148908 0.0001813432 0.0001258572 0.0000185877 0.0000203984 0.0000000413 -0.0001438227 -0.0000181772 0.0000134528 -0.0000048888 -0.0000053257 -0.0000003810 0.0001475153 -0.0007131273 -0.0001446495 0.0007638704 0.0002215481 -0.0006135643 -0.0000734582 0.0000118246 0.0001057639 -0.0000024396 -0.0000141005 0.0000008392 -0.0002507898 0.0001823239 0.0011850063 0.0001005335 0.0006620808 0.0003336258 0.0000970519 0.0000123790 -0.0000172530 -0.0004044714 -0.0002621789 -0.0000335127 0.0001847565 0.0002560151 0.0001687096 0.0014976376 -0.0059863308 -0.0081067914 -0.0011708280 -0.0004773267 -0.0002060605 0.0027138013 0.0042704136 -0.0058506542 0.0024300686 -0.0033879254 0.0003226609 -0.0023283107 -0.0005531634 0.0003236443 -0.0012814170 -0.0037457485 -0.0046430940 -0.0003593150 0.0004397727 -0.0001110218 -0.0007376440 -0.0003468908 -0.0000376257 -0.0000435954 -0.0001722336 0.0003657029 -0.0003855214 -0.0025757936 0.0016618895 -0.0000506241 0.0000004877 0.0000120296 -0.0026607895 -0.0001848611 -0.0030097022 0.0000023651 -0.0000009759 0.0000003409 0.0000007544 -0.0000076658 -0.0000086961 0.0000004189 -0.0000000840 -0.0000000049 -0.0000023079 0.0000034514 -0.0000005595 0.0000023334 -0.0000032507 -0.0000037660 -0.0000037664 0.0000012105 -0.0000013573 -0.0000244132 0.0000707627 0.0000828316 0.0000030514 -0.0000152514 -0.0000144365 0.0000157743 -0.0000025489 -0.0000026169 -0.0000065083 0.0000437536 0.0000436436 0.0000236533 0.0000055795 0.0000179614 0.0000106350 0.0000048815 -0.0000049827 -0.0000481991 -0.0000122796 0.0000356478 0.0000105330 0.0000051926 0.0000017604 -0.0000039738 -0.0000002764 0.0000055762 0.0000091081 0.0000043403 -0.0000018876 -0.0000257442 0.0000016262 -0.0000048713 0.0003334420 0.0001548293 -0.0004209593 -0.0000724954 0.0000142503 0.0000651339 -0.0000061594 -0.0000170206 -0.0000246794 -0.0000559080 -0.0000253772 0.0000495289 -0.0000054116 0.0000014366 0.0000030204 -0.0000067454 -0.0000015251 -0.0000002546 0.0000115017 -0.0000142054 -0.0000376867 0.0000515068 -0.0000102588 -0.0000304331 -0.0000001562 0.0000002875 -0.0000001605 -0.0000014371 0.0000004436 -0.0000002603 0.0000001514 0.0000000091 0.0000001325 0.0000024598 0.0000015759 -0.0000008076 0.0000022361 -0.0000007166 0.0000003243 -0.0000258066 -0.0000145381 0.0000115106 0.0000007715 0.0000113671 -0.0000035620 0.0000030394 -0.0000031026 0.0000007605 -0.0000015408 -0.0001344338 0.0000422571 -0.0000407606 0.0000246987 0.0000013457 0.0000006479 0.0000006488 0.0000004801 -0.0000010525 0.0000003512 0.0000003276 0.0000001384 0.0000041161 -0.0000023394 0.0000061280 0.0000066982 0.0000050266 -0.0000084478 -0.0000513443 0.0000311174 -0.0000596275 -0.0000675457 -0.0000379541 -0.0000016793 -0.0000048975 0.0000018525 0.0000058859 -0.0000011701 0.0000104406 0.0000058445 0.0000612664 -0.0000307000 -0.0000577808 0.0000260543 -0.0001021498 0.0590522897 -0.0623122606 -0.0377501165 0.0276980593 0.3320732522 0.4425378896 -0.7235876468 0.3704856923 0.0972592325 -0.0070737861 0.0471656693 -0.0861400611 0.0015280001 0.0039404179 -0.0021472623 0.0088687329 -0.0039789391 0.0122915783 -0.0271220209 -0.0313236719 0.0251492527 -0.0033711905 -0.0099318414 -0.0076665879 0.0000235766 0.0000026530 -0.0000033334 -0.0000001389 -0.0006327340 0.0002280521 -0.0000012464 0.0000664892 -0.0000240763 0.0000230096 0.0000004395 -0.0000011674 -0.0001055129 -0.0000209936 0.0000291531 -0.0000983574 0.0000318630 -0.0001674879 0.0000199033 0.0000032143 0.0000178621 -0.0000389097 -0.0001451039 0.0000595083 0.0000024637 -0.0000265360 0.0000157166 0.0004032420 0.0015296729 -0.0009306820 0.0002016271 -0.0000457863 0.0000642891 0.0002109285 0.0001800266 0.0000406059 -0.0004066081 -0.0002035963 0.0001917902 0.0002444842 0.0004491271 0.0002395566 0.0001013350 0.0001019917 -0.0001750751 0.0000043081 -0.0002547301 -0.0001414818 -0.0000035175 0.0000016520 0.0000577341 -0.0000240281 0.0000071592 0.0000034341 0.0000183759 0.0000020980 0.0000251059 -0.0000742174 0.0000070287 0.0000348610 0.0000510471 0.0000226778 -0.0000189030 -0.0001778449 -0.0000632726 0.0002056633 0.0000621588 -0.0000041735 -0.0000190833 0.0007482307 0.0002152931 -0.0002344265 -0.0002406445 -0.0005538679 0.0000153615 0.0020728368 0.0004749498 -0.0012423650 -0.0000395684 0.0000396252 0.0000432168 0.0000341623 0.0000293088 -0.0000687783 -0.0001966260 -0.0001332819 -0.0000293106 -0.0000007421 -0.0000050974 0.0000024948 0.0000041349 -0.0000147024 -0.0000024754 0.0000200856 0.0000352729 -0.0000046031 0.0000167119 -0.0000044580 -0.0000026124 0.0000176999 0.0000304766 -0.0000011977 -0.0000116858 0.0000015033 0.0000068467 -0.0002102303 -0.0003643030 0.0000044681 -0.0002558498 -0.0000046366 0.0000188083 -0.0001872429 -0.0002949478 0.0000052287 0.0001646357 0.0000052956 -0.0000894663 -0.0000983075 0.0001920528 0.0000380111 -0.0004179840 -0.0000183733 0.0000099352 0.0065411263 -0.0000552912 0.0002196446 -0.0000571870 -0.0000009484 0.0000314503 0.0001670321 -0.0000310627 0.0000950415 -0.0000872476 -0.0002510689 -0.0000809147 0.0002053098 0.0001270594 0.0000031522 -0.0003329523 0.0003590970 0.0001726158 -0.0124635965 0.0218200348 0.0886622156 0.0038125662 0.0030764892 0.0020627579 -0.0006628997 0.0005380125 -0.0005510900 0.0000181595 0.0000279054 0.0000045362 0.0003566033 -0.0002439062 0.0003040682 0.1310631453 -0.4802098708 -0.6612634829 -0.1543091895 -0.0632305104 -0.0422296448 0.1732040076 0.2723776762 -0.3658846609 0.0014895626 -0.0017306019 0.0008359783 -0.0393996714 -0.0110426270 0.0046962566 -0.0075385681 -0.0249075452 -0.0303241606 0.0097657652 -0.0114076281 0.0016874135 0.0020434944 0.0014929567 0.0002064409 -0.0010960217 -0.0015648829 0.0044917848 0.0005131538 0.0027238016 -0.0021870597 -0.0023897679 0.0000970641 0.0010432816 -0.0024873835 -0.0000201303 -0.0025306051 0.0000194173 -0.0000061346 -0.0000015523 0.0000406595 -0.0001356195 -0.0001408138 -0.0000093771 -0.0000017700 -0.0000035801 -0.0000095725 0.0000065833 0.0000029334 0.0000004164 0.0000031335 -0.0000047024 0.0000161077 0.0000159840 0.0000262744 -0.0004692298 0.0012661551 0.0014530388 0.0001097505 0.0000065437 0.0000286717 0.0000171681 -0.0000105754 -0.0000243379 -0.0000269958 0.0001069633 0.0000524104 -0.0002100839 -0.0000809319 -0.0002723223 -0.0000659107 -0.0001776061 -0.0006640724 -0.0000074883 -0.0000027461 0.0001157631 -0.0000002320 0.0000021410 -0.0000204874 -0.0000010812 0.0000003903 0.0000203718 0.0000134902 -0.0000026400 0.0000115191 0.0003840718 0.0027121195 0.0065533482 0.0008451275 0.0002519382 -0.0008810627 0.0000096155 0.0000335306 0.0000320875 -0.0000052930 -0.0000892260 -0.0002125187 -0.0001557371 0.0000330827 0.0000820223 -0.0000099701 0.0000066781 0.0000168044 -0.0000034126 0.0000018152 0.0000051350 -0.0000090483 -0.0000142486 -0.0000185147 -0.0000094005 0.0000128076 0.0000036779 0.0000028411 0.0000016992 -0.0000014852 -0.0000103567 -0.0000050099 0.0000016415 -0.0000002711 0.0000413435 -0.0000156356 0.0000120802 0.0000045310 -0.0000031209 -0.0000160792 -0.0004657605 0.0001794581 -0.0000843835 -0.0000350458 0.0000251101 0.0000047556 -0.0000004126 0.0000004234 0.0000154782 -0.0000119532 0.0000026294 -0.0000304306 0.0000177803 0.0000013598 -0.0001822353 0.0001247876 -0.0000118010 -0.0000020152 0.0000086581 -0.0000102707 0.0000103129 0.0000048333 0.0000203374 0.0000045456 0.0000397172 -0.0000148006 0.0000334524 0.0000372926 0.0000304562 -0.0000574170 -0.0004429200 0.0001952388 -0.0003099148 -0.0003753363 -0.0002281160 -0.0000177976 -0.0000579112 0.0000257493 0.0000181218 0.0000015108 0.0000315782 0.0001493673 0.0006958818 -0.0003746344 -0.0001056620 0.0000620560 -0.0002266838 -0.0010818667 0.0011855337 0.0007981217 -0.0008429699 -0.0071934370 -0.0092726178 0.0128300059 -0.0068696711 -0.0019340890 0.0000389241 -0.0004632593 0.0011547861 0.0059109084 0.0154280154 0.0054510037 -0.0032182142 0.0046793989 -0.0066075104 -0.0423398610 -0.0527541962 0.0425068339 -0.0215006931 -0.1327002579 -0.0994022090 -0.0000098291 0.0000058576 -0.0000150935 -0.0000154739 -0.0002896492 0.0001127550 -0.0000051335 0.0000231696 -0.0000066492 -0.0000031414 -0.0000077700 -0.0000076343 -0.0000821079 0.0000598576 0.0000293181 0.0000031265 0.0000011314 0.0000029588 0.0000020755 0.0000072573 -0.0000011559 -0.0000066062 -0.0000267084 0.0000191373 -0.0000003569 0.0000015293 -0.0000022336 0.0000728102 0.0002578215 -0.0001650451 -0.0000254017 -0.0000202579 -0.0000070941 -0.0003239175 0.0000059027 0.0000556497 0.0001250001 0.0000529384 -0.0000307547 -0.0000699504 0.0000374282 0.0000831685 -0.0000355862 -0.0000263560 0.0000222183 -0.0007738090 -0.0000406718 0.0001490522 0.0001516430 -0.0002251397 -0.0001724848 -0.0000135112 0.0000172822 0.0000153556 0.0000085604 0.0000038069 -0.0000120511 0.0000098266 0.0000162793 -0.0000017733 -0.0000089869 -0.0000092921 0.0000026183 0.0000398357 0.0000068252 -0.0000365695 -0.0000397159 -0.0000839219 -0.0000076604 -0.0000858480 -0.0000281800 0.0000357901 0.0000934509 0.0002047340 0.0000090155 -0.0004435703 -0.0000853732 0.0002495958 0.0000414794 0.0000217028 -0.0000034474 -0.0000826912 -0.0000051413 -0.0000218849 0.0005774694 0.0004915034 0.0000771126 0.0000197339 0.0000923378 0.0000026015 -0.0000041873 0.0000165672 0.0000153663 -0.0000312814 -0.0000824649 0.0000139951 -0.0014563892 -0.0001224121 0.0005222304 0.0002551126 0.0003333733 -0.0000675462 -0.0000115554 -0.0000064453 0.0000028235 0.0003526213 0.0007538158 -0.0000289592 0.0153424485 0.0003400669 -0.0069793856 -0.0027011586 -0.0046523291 0.0005968612 -0.0000246740 0.0000045859 -0.0000139193 0.0000019370 -0.0000753232 -0.0000260545 -0.0000511893 0.0000287523 0.0000326715 0.0012880868 0.0000597329 -0.0004322193 0.0000037499 0.0000022804 0.0000027123 -0.0000125061 0.0000580600 0.0000574198 -0.0001493551 -0.0001746777 -0.0000976374 0.0004150543 0.0002455490 -0.0001203737 -0.0006556702 0.0000144224 0.0001493581 -0.0008904593 0.0006037824 0.0037370752 -0.0908768465 0.0143631526 -0.0043911058 -0.0026030070 0.0006123842 -0.0006840795 0.0000477433 0.0000015797 -0.0000024011 0.0003707615 -0.0002890165 0.0005008300 0.0054179201 -0.0203197364 -0.0273895951 -0.0014230476 -0.0006925404 -0.0001348843 0.0080188792 0.0127325263 -0.0169519154 0.3256310930 -0.4784791973 0.0456956608 0.7584400949 0.2252785626 -0.0935801850 0.0147470173 0.0818653224 0.0960159609 0.0151109486 -0.0165059592 0.0033287868 0.0183028796 0.0094252681 0.0013462534 -0.0006312598 -0.0016164108 0.0035867492 0.0007518585 0.0035835211 -0.0029003253 -0.0016728177 0.0000174919 0.0007598482 -0.0035860342 -0.0000313415 -0.0037732576 -0.0000506987 -0.0000610472 0.0002083331 -0.0000337844 -0.0000009556 0.0001312848 0.0000200473 0.0000764890 0.0001128162 -0.0000365587 0.0001160877 -0.0001344615 0.0000318433 -0.0000461195 0.0001010974 0.0000260634 -0.0000625783 0.0000958829 0.0002636067 -0.0009438685 -0.0009438117 -0.0012459262 -0.0005963046 -0.0010269628 0.0001328470 -0.0000450044 -0.0002231894 0.0001906145 -0.0004425956 -0.0005392494 -0.0009905030 -0.0003653267 -0.0011317755 -0.0000042593 0.0000027690 0.0000012916 -0.0000019582 0.0000000046 0.0000060398 -0.0000016169 -0.0000027005 -0.0000022206 -0.0000011081 -0.0000003251 -0.0000015436 -0.0000093591 -0.0000027980 0.0000065907 0.0000122306 -0.0000466152 -0.0000678123 0.0000252279 -0.0000117952 -0.0000218125 0.0000086036 -0.0000037185 -0.0000064776 0.0000046742 0.0000039350 0.0000268217 0.0001083016 0.0000281858 -0.0000863672 -0.0000510919 0.0000395677 0.0000828168 0.0000084394 0.0000213683 0.0000398992 -0.0000012125 0.0000024267 0.0000031054 -0.0000048542 -0.0000005965 0.0000019907 0.0000077268 -0.0000023149 0.0000006826 0.0000060753 -0.0000007424 -0.0000001870 -0.0000037003 0.0000014582 -0.0000008895 0.0000098767 0.0000001236 -0.0000016462 -0.0000050493 -0.0000629428 0.0000251740 -0.0000617238 -0.0000401003 0.0000238397 -0.0000066382 -0.0000266659 0.0000109495 0.0000203425 -0.0000075697 -0.0000004405 0.0000297206 0.0003154541 -0.0001306050 -0.0001604091 0.0001036214 -0.0000086080 -0.0000025078 -0.0000046279 -0.0000010523 0.0000004803 0.0000001800 0.0000004159 -0.0000002400 -0.0000080082 0.0000073165 -0.0000048177 -0.0000032605 -0.0000039061 0.0000143608 0.0001165174 -0.0000862792 0.0000433601 0.0000420083 0.0000253479 -0.0000045337 -0.0000210211 0.0000122150 0.0000027610 -0.0000010765 0.0000065425 0.0000488669 0.0002126779 -0.0001147610 -0.0000310555 0.0000052011 -0.0000610655 -0.0000001574 -0.0000152231 -0.0000165716 0.0000327399 0.0002127291 0.0002394347 0.0000271188 0.0000336579 -0.0000018219 -0.0000085333 -0.0000265760 -0.0000055554 -0.0007238903 -0.0015549261 -0.0011239324 0.0030378884 -0.0019827447 0.0044132052 0.0031571341 0.0037064809 -0.0031720547 0.0028915848 0.0165691333 0.0122997126 -0.0000001647 0.0000011932 -0.0000001682 0.0000001126 0.0000471887 -0.0000177157 -0.0000004579 -0.0000048892 0.0000018984 0.0000004433 -0.0000000861 -0.0000001110 -0.0000017129 0.0000009418 0.0000001537 -0.0000024687 0.0000010466 -0.0000046254 0.0000010903 0.0000009857 0.0000006016 -0.0000023611 -0.0000094298 0.0000057397 -0.0000004908 -0.0000005216 0.0000003111 0.0000263986 0.0001022716 -0.0000672336 0.0000036533 -0.0000019807 0.0000025784 0.0000005804 0.0000007036 0.0000017702 -0.0000045704 -0.0000000565 -0.0000006638 0.0000042377 0.0000021282 0.0000061417 0.0000032937 -0.0000002251 0.0000019500 -0.0000391716 0.0001313179 0.0000284283 -0.0000371832 0.0000628667 0.0000348818 0.0000015023 -0.0000104818 -0.0000037819 -0.0000073729 0.0000051161 0.0000059663 0.0000094128 0.0000055260 -0.0000034801 -0.0000006785 -0.0000098926 -0.0000019870 0.0000236437 0.0000089118 -0.0000153555 -0.0000011150 -0.0000036776 -0.0000022130 -0.0000993190 -0.0000253152 0.0000451062 0.0000460332 0.0001066997 -0.0000038309 -0.0002671245 -0.0000425035 0.0001493771 0.0000106372 -0.0000174125 -0.0000129852 -0.0000376147 0.0000145400 -0.0000072679 0.0001466931 0.0001321392 0.0000066370 0.0000177153 0.0000253240 0.0000357980 -0.0000389874 -0.0001211992 -0.0001052691 -0.0001144310 0.0000059366 0.0000043375 -0.0000335100 -0.0000028842 -0.0000484977 0.0000000825 -0.0000193664 -0.0000882208 0.0003657449 -0.0000347371 -0.0003234850 0.0006076357 0.0010259333 -0.0000315851 0.0001689335 0.0000121367 -0.0000310939 0.0002694177 0.0004207310 -0.0000206475 -0.0044544742 -0.0000599690 0.0021669708 -0.0005187715 0.0011942288 0.0006465419 0.0000345457 0.0000028540 -0.0000008607 -0.0005151737 -0.0000306835 -0.0000008324 0.0000000612 0.0000003396 -0.0000005159 -0.0000672514 0.0001563533 -0.0000460071 0.0000689477 -0.0003030071 0.0000738910 0.0001023454 -0.0000716904 0.0001918813 -0.0000066172 0.0000136672 -0.0000353982 -0.0000434531 0.0001994574 0.0005954961 -0.0006217195 0.0000353159 -0.0000597978 0.0001820373 0.0003371627 -0.0003354655 0.0002440035 -0.0003727251 0.0003645930 -0.0404967640 0.0460694137 -0.0741418618 0.0008765689 -0.0033711075 -0.0046981435 -0.0013960595 -0.0005678455 -0.0003883406 0.0010194941 0.0013930872 -0.0019733554 0.0020192641 -0.0030791894 0.0003141730 0.0053336512 0.0015729779 -0.0006757942 0.0002310791 0.0010424441 0.0012541678 0.0010681389 -0.0010020141 0.0000987636 -0.0027609355 -0.0013139903 -0.0001497311 -0.0008238353 -0.0018534561 0.0042429098 -0.1153056185 -0.5423673590 0.4344381656 0.1202100081 0.0007002626 -0.0586477247 0.4736983336 0.0007498024 0.5020713782 -0.0000017200 -0.0000004662 -0.0000001213 0.0000021836 0.0000006004 0.0000028606 -0.0000014048 0.0000018682 0.0000013153 0.0000036178 -0.0000015755 -0.0000000959 -0.0000005884 -0.0000027030 -0.0000025186 0.0000107647 0.0000025242 0.0000106004 0.0000022945 -0.0000109235 -0.0000178998 -0.0000114641 -0.0000032924 0.0000047218 -0.0000201308 -0.0000035789 -0.0000095002 -0.0000088313 0.0000203194 0.0000135121 -0.0001117556 -0.0000460930 -0.0001187669 -0.0000009519 -0.0000000183 0.0000006824 0.0000033141 0.0000007017 -0.0000010045 0.0000002428 0.0000000058 -0.0000004998 -0.0000006273 -0.0000003135 0.0000015531 0.0000014454 0.0000005023 0.0000004194 0.0000057136 -0.0000073572 -0.0000273021 -0.0000284009 -0.0000057439 0.0000028041 -0.0000008424 -0.0000018002 -0.0000054312 -0.0000084215 0.0000030295 -0.0000104200 -0.0000118484 0.0000021164 0.0000086201 0.0000046427 0.0000016363 0.0000026300 0.0000119536 0.0000051095 0.0000039139 0.0000008982 0.0000007867 0.0000034555 0.0000003821 -0.0000009063 0.0000018131 0.0000004853 0.0000000252 0.0000002454 0.0000000009 -0.0000000181 0.0000003092 -0.0000003052 -0.0000030283 0.0000014075 0.0000007699 0.0000000902 0.0000001386 0.0000010302 0.0000324049 -0.0000120599 -0.0000063224 -0.0000041359 0.0000037547 -0.0000005845 -0.0000177954 0.0000061877 0.0000014344 0.0000003404 -0.0000001045 -0.0000004525 0.0002028381 -0.0000614100 -0.0000041389 0.0000016504 0.0000001790 -0.0000002792 -0.0000001790 -0.0000007771 -0.0000000823 -0.0000000094 0.0000003631 -0.0000003014 -0.0000026208 0.0000015208 0.0000001262 0.0000008167 0.0000001780 0.0000055150 0.0000303412 -0.0000183460 -0.0000009362 -0.0000045095 -0.0000011165 -0.0000026845 -0.0000109561 0.0000056056 0.0000027502 -0.0000005407 0.0000054327 0.0000259735 0.0001196707 -0.0000662776 -0.0000254686 0.0000091345 -0.0000511346 -0.0000045977 0.0000270600 -0.0001706435 0.0000148214 0.0005675948 0.0007811952 -0.0001908418 0.0001697967 -0.0000252318 0.0002493274 -0.0010506849 0.0013184901 -0.0001967451 -0.0002542810 -0.0003833058 0.0015690664 -0.0009065635 0.0023058476 0.0003240936 0.0003408091 -0.0004510872 0.0006440235 0.0036357346 0.0026421317 -0.0000173962 -0.0000120706 0.0000058271 0.0000221083 0.0009279402 -0.0003497162 0.0000015674 -0.0000884810 0.0000324592 -0.0000305342 -0.0000028670 0.0000059922 0.0001475763 0.0000468340 -0.0000354773 0.0000502255 -0.0000201528 0.0000901334 -0.0000103920 -0.0000073181 -0.0000125525 0.0000167464 0.0000619264 -0.0000322597 -0.0000007570 0.0000061411 -0.0000069648 -0.0001675924 -0.0006409999 0.0003806347 -0.0001189298 0.0000434551 -0.0000253661 -0.0000719992 -0.0000825722 0.0000002799 0.0001197836 0.0000666772 -0.0001180992 -0.0000579425 0.0000626700 0.0000573118 0.0000041141 -0.0000268088 0.0000723376 -0.0005527664 -0.0034447595 -0.0003338369 -0.0005542646 0.0007852961 0.0005868597 -0.0000428935 -0.0001330014 -0.0000355446 -0.0000919278 -0.0000364557 0.0001546448 0.0000352588 0.0000597021 0.0000057129 0.0001851902 0.0000474447 -0.0000829633 -0.0004220078 -0.0000989991 0.0005488319 0.0002249004 0.0002362089 -0.0001141570 -0.0006835572 -0.0001063423 0.0002523558 -0.0007580817 -0.0015945965 -0.0000851288 0.0050693512 0.0012240547 -0.0029972122 0.0001805834 0.0003677760 0.0000522574 0.0000953897 0.0001281333 -0.0000163173 -0.0020013400 -0.0018189051 -0.0004163265 0.0000317354 0.0000598640 -0.0000092096 0.0000281844 -0.0000479908 -0.0000148044 0.0000114906 0.0000206008 0.0000022100 -0.0012752748 -0.0001428134 0.0004791284 0.0002160045 0.0002607249 -0.0000595149 -0.0000594862 -0.0000073713 0.0000237338 -0.0000610474 -0.0000938248 -0.0000050174 0.0128003997 0.0005016035 -0.0060151954 -0.0020781658 -0.0035143999 0.0005337904 0.0007299348 0.0000213700 -0.0002993709 -0.0003291230 0.0006930373 0.0002273241 0.0004248920 -0.0000876504 -0.0000298488 -0.0081789511 -0.0003298516 0.0004448198 0.0000149981 -0.0000135032 -0.0000045546 0.0003845536 -0.0003320625 -0.0000628683 0.0003325736 0.0001352246 0.0000916597 -0.0001793138 -0.0001601829 -0.0000046376 0.0000219955 0.0002484450 0.0001037948 0.0016086226 -0.0037622228 -0.0127837666 0.0060524445 0.0660064953 0.0366773383 -0.0003947614 0.0001067953 -0.0001154431 0.0000282760 -0.0000325119 -0.0000451387 -0.0002279327 0.0002049772 -0.0002432091 -0.0198228380 0.0718392006 0.1002330896 0.0244621402 0.0101169650 0.0071647479 -0.0229007088 -0.0361975664 0.0482478771 0.2422992028 -0.3455950210 0.0351239296 -0.1769323815 -0.0423044451 0.0265986728 -0.1390902250 -0.4081894402 -0.4978750331 0.0026010452 -0.0027151587 0.0005262435 0.0023735524 0.0013232544 0.0001905803 0.0004409184 0.0002083030 -0.0018434038 -0.0004398343 -0.0022406554 0.0017441747 0.0014236932 -0.0000838625 -0.0006528780 0.0017704926 -0.0000349723 0.0017671050 0.0000276867 0.0000339961 -0.0000273287 -0.0000175787 0.0000141451 0.0000159530 -0.0000503239 -0.0000020414 -0.0000218617 0.0000918881 0.0001386123 -0.0000548596 -0.0000271958 0.0000030790 -0.0001485121 0.0000223754 0.0000123063 0.0000162351 0.0001334323 -0.0001391799 -0.0003569141 0.0004221808 0.0001483064 0.0003561428 0.0000490394 0.0000172946 -0.0001124851 -0.0002180300 0.0003911515 0.0006648561 -0.0001835083 -0.0000942187 -0.0001760203 0.0000228754 0.0000311692 0.0000654635 -0.0001937213 -0.0000374993 0.0001162312 0.0000311868 0.0000365692 0.0000023061 -0.0000103000 -0.0000071302 0.0000063293 0.0000305592 0.0000156907 -0.0000137870 -0.0000640114 -0.0001991290 -0.0005307294 0.0017518475 0.0005368285 -0.0017182542 -0.0002005792 0.0000023787 0.0000516406 -0.0000483345 -0.0000280412 -0.0000480589 -0.0002887117 -0.0001093501 0.0002569275 -0.0000136071 0.0000087414 0.0000274499 0.0000138096 0.0000013297 0.0000243321 0.0000328373 -0.0000026201 -0.0000077575 0.0000889006 0.0000510259 -0.0000121013 -0.0000054901 -0.0000010917 0.0000018731 0.0000074484 0.0000076086 -0.0000052900 0.0000012967 -0.0000534134 0.0000216608 -0.0000118493 -0.0000025422 0.0000031415 0.0000250295 0.0006267301 -0.0002459208 0.0000597978 0.0000266878 -0.0000137650 -0.0000025028 0.0000000036 0.0000005868 -0.0000235641 0.0000163455 -0.0000018080 0.0000092187 -0.0000250956 0.0000150846 0.0002566616 -0.0001760050 0.0000214741 0.0000039993 -0.0000017760 0.0000088311 -0.0000030072 -0.0000002993 -0.0000053937 -0.0000025080 -0.0000102806 0.0000020966 -0.0000209121 -0.0000245370 -0.0000151964 0.0000249818 0.0001096010 -0.0000305500 0.0002175818 0.0002567297 0.0001606904 0.0000093861 0.0000374949 -0.0000176786 -0.0000082415 0.0000011675 -0.0000149901 -0.0000913847 -0.0004312757 0.0002289361 0.0000508662 -0.0000284826 0.0001097956 -0.0013659215 0.0015755372 0.0011885742 -0.0017019293 -0.0110964733 -0.0140389997 0.0155345379 -0.0087430537 -0.0026889787 -0.0001373224 -0.0000969449 0.0011228316 0.0211425978 0.0471038646 0.0130923086 -0.0218760656 0.0196175898 -0.0347774388 -0.1728592819 -0.2038642818 0.1594915440 -0.0632292597 -0.3745332121 -0.2818159867 -0.0000062178 0.0000048174 -0.0000017457 -0.0000142697 -0.0001085249 0.0000529915 0.0000003991 0.0000075669 -0.0000022041 0.0000012286 0.0000022756 -0.0000027595 -0.0000109080 -0.0000059647 0.0000015943 0.0000395956 -0.0000130007 0.0000633678 -0.0000080830 -0.0000002587 -0.0000103978 0.0000101702 0.0000382508 -0.0000184440 0.0000021469 0.0000061659 -0.0000046210 -0.0000989200 -0.0004035293 0.0002501199 -0.0000780674 0.0000061834 -0.0000171587 -0.0001026177 -0.0000631375 -0.0000129136 0.0002132233 0.0001081009 -0.0000843742 0.0000470453 -0.0001724993 -0.0001031384 -0.0000659979 -0.0000437029 0.0000642291 0.0009550017 0.0047366350 -0.0001165014 0.0005942510 -0.0009340149 -0.0006662593 -0.0002118051 -0.0000424601 0.0000894119 -0.0000847612 0.0000246244 0.0001691627 0.0000987719 0.0002476856 0.0000160192 0.0002346550 0.0000019013 -0.0001265757 -0.0003603157 -0.0000930740 0.0006055295 0.0000247733 -0.0003718733 -0.0002419061 -0.0014319308 -0.0003241148 0.0006893174 -0.0004062669 -0.0008967003 -0.0000142338 0.0046061757 0.0012043556 -0.0027058593 -0.0001641482 -0.0002791179 -0.0000967621 0.0001612134 0.0002763043 0.0001900169 -0.0031091652 -0.0030353575 -0.0009069952 -0.0000020718 -0.0000922732 -0.0000464398 -0.0000012097 0.0000370377 0.0000062101 -0.0000383971 -0.0000220179 0.0000101737 0.0008953448 0.0000964702 -0.0003335701 -0.0001738952 -0.0001909076 0.0000509913 -0.0000439455 -0.0000056382 0.0000215223 0.0002524941 0.0004462650 -0.0000897939 -0.0090050065 -0.0004920202 0.0042044526 0.0014693394 0.0025353241 -0.0003507017 0.0005196759 0.0000052860 -0.0002188804 0.0000925118 -0.0002446080 -0.0000727251 -0.0000817245 0.0001091634 0.0001103383 0.0025617855 0.0003040526 -0.0007975473 0.0000174480 -0.0000071535 -0.0000019413 0.0004541469 -0.0005252565 -0.0002223491 0.0006071401 0.0004162164 0.0001743624 -0.0002821948 -0.0000628434 0.0000521649 -0.0000077201 -0.0003711694 -0.0001164427 0.0012016954 -0.0033008571 -0.0107817464 -0.0073240878 -0.0468345531 -0.0272169441 0.0002936833 -0.0001273334 0.0001622151 0.0000511818 -0.0000675264 -0.0000782479 -0.0002206137 0.0002095303 -0.0001676351 -0.0174125217 0.0621143536 0.0859755875 0.0226799152 0.0091008936 0.0070649191 -0.0183601384 -0.0285333194 0.0382425855 -0.1600011687 0.2275822645 -0.0238336357 0.1478383888 0.0370508170 -0.0217173338 0.1021630368 0.3045953512 0.3684023403 -0.0032691512 0.0037195888 -0.0004730813 -0.0012570169 -0.0007888292 -0.0000500205 -0.0000992090 0.0000586685 0.0003934145 -0.0004362703 -0.0022108972 0.0016513303 0.0018220054 -0.0001146083 -0.0008455629 0.0012740505 -0.0000845167 0.0012094604 -0.0000307180 -0.0000189134 0.0000195772 -0.0000146393 0.0000824389 0.0000850948 0.0000349216 0.0000017438 0.0000138334 -0.0000533664 -0.0000996613 0.0000345075 0.0000142004 0.0000036175 0.0001097092 -0.0000180068 -0.0000178452 -0.0000199488 0.0002327837 -0.0007771241 -0.0007521244 -0.0003234422 -0.0000690392 -0.0002111639 -0.0000643535 -0.0000072511 0.0000801751 0.0001825417 -0.0004104863 -0.0005712006 0.0001822121 0.0000927330 0.0002144918 0.0000162961 0.0000070432 -0.0000141893 -0.0002845634 -0.0000488597 0.0001983370 0.0000288774 0.0000412925 -0.0000029028 -0.0000084866 -0.0000102555 -0.0000042061 0.0000269843 0.0000136439 -0.0000105633 0.0000002177 0.0001520034 0.0003546208 0.0027586525 0.0008076791 -0.0026372442 -0.0002333024 0.0000174478 0.0000869196 -0.0000171734 -0.0000124532 0.0000873501 -0.0002516656 -0.0000802511 0.0002452890 0.0000201648 -0.0000090373 -0.0000264527 0.0000049386 0.0000026889 -0.0000154892 0.0000341580 -0.0000085244 -0.0000252551 0.0001030861 0.0000658836 -0.0000176183 0.0000008236 -0.0000003042 0.0000003925 0.0000027680 -0.0000000686 0.0000018972 -0.0000001712 0.0000083088 -0.0000033373 -0.0000010676 -0.0000015974 0.0000010904 -0.0000068665 -0.0000928141 0.0000471019 0.0000186835 0.0000165292 -0.0000011057 -0.0000009697 -0.0000047819 0.0000014268 -0.0000069461 0.0000057904 -0.0000007774 0.0000086714 0.0000688919 -0.0000172906 0.0000877361 -0.0000501778 0.0000092206 0.0000004882 -0.0000037755 0.0000041310 -0.0000018232 -0.0000004908 -0.0000040949 -0.0000018139 -0.0000134270 0.0000052924 -0.0000090715 -0.0000097058 -0.0000079871 0.0000192104 0.0001583074 -0.0000708309 0.0000810314 0.0001037565 0.0000635641 0.0000069941 0.0000273086 -0.0000131430 -0.0000032898 -0.0000014582 -0.0000050356 -0.0000652124 -0.0003180297 0.0001725677 0.0000036322 -0.0000034135 0.0000170389 -0.0013846590 0.0016055214 0.0013222374 -0.0020088379 -0.0122948767 -0.0153538814 0.0148035075 -0.0087333381 -0.0027855006 -0.0002721232 0.0004746481 0.0004894130 0.0304681570 0.0671657535 0.0123095589 -0.0140526462 0.0187015511 -0.0251907508 -0.2738549676 -0.3234604168 0.2508085577 -0.0835973398 -0.4948664485 -0.3732685614 0.0009185660 0.0002193351 -0.0001548924 0.0111256983 0.1434478797 -0.0562146113 -0.0011016452 -0.0126613077 0.0049293838 -0.0000416750 0.0000868685 -0.0000217200 -0.0000656514 0.0000112940 -0.0000005539 -0.0000069191 -0.0000064784 -0.0000083203 0.0000324484 -0.0000076797 0.0000040959 0.0000053187 0.0000137059 -0.0000057596 -0.0000015274 0.0000016398 -0.0000003775 -0.0000380885 -0.0001088924 0.0000468052 0.0000021119 0.0000076166 0.0000020612 0.0000605853 0.0000189595 -0.0000097753 -0.0000139581 -0.0000166114 -0.0000056181 0.0000097611 0.0000065021 -0.0000035776 0.0000071366 0.0000022692 0.0000109360 0.0000004114 0.0000090168 -0.0000098279 0.0000287026 -0.0000464017 -0.0000368775 -0.0000021895 0.0000029053 0.0000028587 -0.0000006136 -0.0000007927 0.0000002463 0.0000120840 0.0000026437 -0.0000054920 -0.0000030576 -0.0000068579 -0.0000003515 -0.0000007641 0.0000003121 0.0000008453 -0.0000005584 0.0000009048 -0.0000003089 -0.0001399786 -0.0000342509 0.0000602376 0.0000375480 0.0000762879 0.0000037491 0.0000067191 0.0000028640 -0.0000051421 -0.0000003097 -0.0000008686 0.0000004486 -0.0000013517 0.0000001148 -0.0000009181 0.0000084167 0.0000067099 0.0000006639 0.0000002663 -0.0000002131 0.0000001071 0.0000020116 -0.0000050253 -0.0000015538 -0.0000037705 -0.0000064500 0.0000006070 -0.0000003285 0.0000001005 0.0000004238 0.0000004757 0.0000005033 -0.0000000556 0.0000062854 0.0000005875 -0.0000024054 0.0000421325 0.0000709060 -0.0000067275 0.0000007912 0.0000033029 -0.0000055199 -0.0000069814 -0.0000057416 0.0000016528 -0.0000710602 -0.0000016167 0.0000286425 -0.0000260562 0.0000529367 0.0000184080 0.0000310413 0.0000013789 0.0000000025 -0.0005035544 -0.0000143523 -0.0000081648 -0.0000020535 -0.0000016997 -0.0000025719 0.0000000371 0.0000006896 0.0000008519 -0.0000039027 -0.0000025194 0.0000004831 0.0000040570 0.0000017393 -0.0000003422 -0.0000029588 0.0000007341 0.0000017744 -0.0000028462 -0.0000196799 -0.0000308573 0.0000032692 0.0000294955 0.0000130715 -0.0000037785 -0.0000000136 -0.0000014326 0.0000012403 -0.0000005148 -0.0000010444 0.0000202498 0.0000091445 -0.0000106818 -0.0000679834 0.0001905476 0.0002998334 0.0001286193 0.0000548266 0.0000547284 -0.0000112301 -0.0000206664 0.0000231375 0.0001487740 -0.0001994309 0.0000179418 -0.0001110130 0.0000086167 0.0000127399 -0.0000693406 -0.0001569826 -0.0002024253 0.0000290049 -0.0000313379 0.0000077047 0.0000258901 0.0000185459 0.0000068192 0.0000013098 0.0000037636 -0.0000100817 -0.0000205109 -0.0001097849 0.0000869214 -0.0001931741 0.0000057626 0.0000786923 -0.0000295537 -0.0000008562 -0.0000326822 -0.0000308649 -0.0000021766 0.0000046152 -0.0000182121 -0.0000009516 -0.0000115995 0.0000026759 -0.0000046468 -0.0000027890 0.0000063728 0.0000003561 0.0000043308 -0.0000052918 -0.0000075116 -0.0000135991 0.0000715129 0.0000435051 0.0000844626 -0.0000297497 0.0001237941 0.0000718020 -0.0000100941 0.0000019386 -0.0000059983 -0.0000058847 0.0000025073 0.0000005281 -0.0000464945 0.0001575152 0.0001421540 -0.0009960872 -0.0003997959 -0.0009258070 0.0000023604 0.0000045235 0.0000096054 0.0000000846 -0.0000006744 -0.0000022236 0.0000023512 0.0000015077 0.0000009178 -0.0000015784 -0.0000008495 -0.0000004797 0.0000051086 0.0000024584 -0.0000024523 -0.0000130043 -0.0000389751 -0.0000990301 -0.0000130998 -0.0000033341 0.0000141381 -0.0000040588 -0.0000025127 -0.0000022344 0.0000029889 0.0000023290 0.0000036086 -0.0000424328 -0.0000225572 0.0000324176 0.0000018844 -0.0000016146 -0.0000009546 0.0000020537 -0.0000004555 0.0000008068 0.0000010128 0.0000013695 0.0000014929 0.0000017761 0.0000005952 -0.0000000382 -0.0029177630 -0.0001807766 0.0005127757 0.0002644759 -0.0003358748 0.0000776596 0.0030328116 0.0668529572 -0.0270170561 -0.0326805585 -0.0163890206 0.0118045271 -0.0285240521 -0.7723633325 0.3117014410 0.4069756223 0.1777458548 -0.1370213070 -0.0002262010 0.0056738289 -0.0020477920 0.0162954262 -0.0100143679 0.0007689152 -0.0027672655 -0.0711927437 0.0271335907 -0.1908070881 0.1261002233 -0.0122701846 0.0000300148 0.0000046486 -0.0000155452 0.0000119455 -0.0000073746 0.0000198739 0.0000114585 0.0000370177 -0.0000359708 -0.0001656497 -0.0001929755 -0.0001169453 -0.0000720249 -0.0004719924 0.0003010274 0.0019703645 0.0022540170 0.0013744679 0.0000876023 0.0004775183 -0.0002606009 0.0001437394 -0.0000661080 0.0002770513 -0.0011013650 -0.0055369769 0.0029174004 -0.0017919972 0.0007793878 -0.0033981111 -0.0000010007 0.0000003704 0.0000005198 -0.0000021701 -0.0000018517 -0.0000017138 0.0000163408 -0.0000073387 -0.0000036630 -0.0000019071 0.0000019572 -0.0000024288 0.0000059658 0.0000143239 -0.0000080893 0.0000367592 -0.0000225428 0.0000533854 -0.0001058825 -0.0001076662 0.0000840526 -0.0000080491 -0.0000448472 -0.0000376995 0.0000132500 0.0000026259 -0.0000041702 0.0001546727 0.0022750666 -0.0008840347 -0.0000158525 -0.0002043613 0.0000787127 0.0000156700 0.0000165464 0.0000136702 -0.0000126502 0.0000040897 0.0000018079 -0.0000636229 -0.0000922332 -0.0000013901 -0.0000251651 -0.0000867822 0.0000167818 0.0037278825 0.0170173703 -0.0108042132 0.0007422375 -0.0000206071 0.0010348170 -0.0445392588 -0.1938508953 0.1211620492 0.0000341939 0.0000054610 0.0000297510 0.0000051968 -0.0000051931 -0.0000005031 -0.0000134598 0.0000067936 -0.0000026052 0.0000107058 -0.0000001039 -0.0000050114 0.0000045385 -0.0000030779 0.0000050651 0.0000054889 0.0000191025 -0.0000013758 -0.0000248562 0.0000382357 0.0000257528 0.0000017021 -0.0000045360 -0.0000023617 -0.0000011898 -0.0000001954 0.0000008622 0.0000043738 0.0000015364 -0.0000017345 0.0000029718 0.0000051449 0.0000003193 0.0000013033 0.0000004862 -0.0000004297 -0.0000003003 0.0000001191 -0.0000004659 -0.0000512510 -0.0000137781 0.0000185971 -0.0000319223 -0.0000590179 -0.0000075357 -0.0000120906 -0.0000021494 0.0000071405 0.0000009965 -0.0000013842 -0.0000012235 -0.0000005639 0.0000006291 0.0000024790 -0.0000107563 -0.0000101747 -0.0000037248 -0.0000000085 -0.0000004935 -0.0000002315 -0.0000000974 0.0000003906 0.0000000641 0.0000006404 0.0000012514 -0.0000000612 0.0000047251 0.0000004847 -0.0000021099 -0.0000021756 -0.0000038067 0.0000004322 0.0000016027 -0.0000000353 -0.0000007083 -0.0000088027 -0.0000133105 0.0000014232 -0.0000557700 -0.0000036816 0.0000247997 0.0000240460 0.0000439248 -0.0000052148 -0.0000179476 -0.0000004919 0.0000079233 0.0000022766 -0.0000053447 -0.0000015199 0.0000190717 0.0000009255 -0.0000003303 -0.0003045216 -0.0000057395 0.0000026978 0.0000190212 0.0000280036 -0.0000549047 -0.0000003505 -0.0000008635 -0.0000020091 -0.0000004320 0.0000029030 0.0000026773 -0.0000007404 -0.0000007985 -0.0000009053 -0.0000000660 -0.0000002427 0.0000020432 -0.0000032264 -0.0000120988 -0.0000165769 0.0000072590 0.0000053920 0.0000004823 0.0000005679 -0.0000038772 0.0000029973 0.0000012120 -0.0000008471 -0.0000013274 0.0000165360 0.0000028849 -0.0000008203 -0.0000446679 0.0001063032 0.0001821002 0.0000540816 0.0000162847 0.0000404674 0.0000267754 0.0000184927 -0.0000227766 0.0000144340 -0.0000199396 -0.0000023384 -0.0000877574 -0.0000133122 0.0000175362 -0.0000191692 -0.0000227576 -0.0000362109 -0.0000267134 0.0000273660 -0.0000063465 0.0000078524 0.0000017529 0.0000039755 0.0000130921 0.0000165752 -0.0000471426 -0.0000039970 -0.0000318720 0.0000234402 -0.0001347264 0.0000024191 0.0000552734 -0.0000571021 -0.0000012269 -0.0000632287 -0.0000032774 -0.0000001873 -0.0000002249 -0.0000018152 0.0000075537 0.0000077598 -0.0000014218 -0.0000004441 -0.0000012374 0.0000016587 -0.0000006978 -0.0000000684 -0.0000009528 0.0000001408 -0.0000007096 0.0000039459 0.0000008391 0.0000030295 0.0000247206 -0.0000777573 -0.0000848362 0.0000119951 0.0000068991 0.0000121979 -0.0000028450 0.0000009039 0.0000004093 0.0000023565 -0.0000007958 0.0000003363 -0.0000314474 -0.0000116053 -0.0000264999 0.0000423890 0.0001872735 0.0006056577 0.0000327197 -0.0000072044 -0.0000652079 -0.0000021695 0.0000049913 0.0000116806 0.0000161173 0.0000072582 -0.0000044815 -0.0000084828 -0.0000263309 -0.0000486951 -0.0006283379 -0.0023317081 -0.0067377760 -0.0007402986 -0.0001993490 0.0006672520 -0.0000052180 -0.0000015608 -0.0000021665 -0.0000238617 -0.0000041069 -0.0000345065 -0.0003205165 -0.0000922669 0.0003162846 0.0000009238 -0.0000006285 -0.0000007156 0.0000010191 -0.0000000524 0.0000001693 0.0000018349 0.0000012062 0.0000020583 0.0000024965 0.0000011114 0.0000007442 -0.0000224353 0.0000067122 0.0000031634 0.0000213878 -0.0000042020 0.0000351357 0.0000164644 0.0005371173 -0.0002178326 -0.0002550091 -0.0001418614 0.0000957048 -0.0002308124 -0.0062178300 0.0025091417 0.0031854351 0.0013931252 -0.0010713196 -0.0000173652 0.0000129130 0.0000154867 0.0000450628 -0.0000090870 -0.0000034715 0.0000370814 -0.0001685805 0.0000343836 -0.0004693084 0.0003031252 -0.0000154283 0.0001761881 0.0002693206 0.0000627379 -0.0018351316 -0.0005274899 -0.0023037886 -0.0010715840 -0.0043427149 0.0015915975 0.0131430511 0.0142693587 0.0098522698 0.0098491777 0.0549674345 -0.0269633954 -0.1548685718 -0.1767821508 -0.1091843366 -0.0112496932 -0.0587598056 0.0316127712 -0.0183461311 0.0098052101 -0.0362777546 0.1356630252 0.6829650784 -0.3597367999 0.2301171746 -0.0998382493 0.4361243865 -0.0000027693 0.0000016349 0.0000020136 -0.0000020388 -0.0000100649 -0.0000123536 0.0000374165 -0.0000193838 -0.0000050813 -0.0000014790 0.0000057167 -0.0000051313 0.0000110882 0.0000226237 -0.0000026564 0.0000187669 -0.0000019845 0.0000290492 -0.0001320922 -0.0001343253 0.0001140448 -0.0000301115 -0.0001320157 -0.0001020872 0.0003411335 0.0000961968 -0.0000699828 0.0042305509 0.0704610221 -0.0274479124 -0.0004658624 -0.0062000072 0.0024148516 0.0000004501 0.0000070855 0.0000105049 0.0000169322 0.0000763864 -0.0000211562 0.0001541595 0.0006967518 -0.0004010265 0.0000243106 0.0000579231 -0.0000846787 -0.0158827042 -0.0704020848 0.0441191841 -0.0025154963 0.0002039212 -0.0036000439 0.1911509328 0.8044208583 -0.4940838125 0.0001106456 -0.0001251307 0.0001484650 -0.0000096901 -0.0000370832 -0.0000053272 -0.0000584127 0.0000386931 0.0000076694 0.0000368813 0.0000033578 -0.0000159553 0.0000233261 -0.0000130489 0.0000133625 0.0000284920 0.0000585716 -0.0000086919 0.0002640828 -0.0004230429 -0.0002971251 -0.0000252383 0.0000336986 0.0000262158 -0.0000015929 -0.0000025679 0.0000003820 0.0000313392 0.0000073191 -0.0000163110 0.0000083728 0.0000148078 -0.0000009846 0.0000098293 0.0000021027 -0.0000059311 -0.0000035427 -0.0000049187 -0.0000010518 -0.0003981599 -0.0001028081 0.0001849298 -0.0000618049 -0.0001437661 -0.0000052691 -0.0000980641 -0.0000271218 0.0000593960 -0.0000008395 -0.0000038125 -0.0000010138 0.0000043851 0.0000051014 0.0000054380 -0.0000660834 -0.0000775149 -0.0000091640 -0.0000005842 -0.0000004479 -0.0000005000 0.0000015123 -0.0000014205 -0.0000009139 0.0000134039 0.0000225799 -0.0000022259 -0.0000030382 0.0000006808 0.0000015764 -0.0000046889 -0.0000090461 0.0000009594 -0.0000089774 -0.0000007360 0.0000035502 -0.0001482660 -0.0002539246 0.0000237096 0.0000239687 -0.0000104204 -0.0000119220 0.0000469920 0.0000926025 -0.0000085250 0.0001125256 0.0000024408 -0.0000459049 -0.0000142557 0.0000253222 0.0000094456 0.0000845311 0.0000090826 -0.0000017372 -0.0013368502 -0.0000579777 0.0000188400 -0.0001676655 -0.0002420317 0.0002736890 0.0000005985 0.0000002648 -0.0000030089 -0.0000023682 0.0000010450 0.0000020100 0.0000021518 0.0000026547 -0.0000012755 -0.0000014520 -0.0000052304 0.0000039559 -0.0000147614 -0.0001161718 -0.0001852868 0.0000236804 0.0000180363 0.0000050871 -0.0000021099 -0.0000063750 0.0000076964 0.0000003666 0.0000004329 -0.0000002543 0.0000800761 0.0000129174 -0.0000217534 -0.0004250135 0.0013467262 0.0020503725 0.0005024702 0.0001727099 0.0002255546 0.0000707611 -0.0000560074 -0.0000006743 0.0000132988 -0.0000232917 -0.0000167915 -0.0002491416 -0.0000465709 0.0000461016 -0.0000689560 -0.0000947854 -0.0001329615 -0.0000509615 0.0000573350 -0.0000055692 0.0000426967 0.0000214613 0.0000114460 0.0000289413 0.0000373411 -0.0001192608 -0.0000297471 -0.0001872710 0.0001518538 -0.0007385327 0.0000199788 0.0003010421 -0.0001762775 0.0000013818 -0.0001967953 -0.0000138268 -0.0000160705 0.0000010223 -0.0000143641 0.0000129333 0.0000055663 -0.0000035521 -0.0000043856 -0.0000075691 0.0000045794 -0.0000003985 0.0000020378 -0.0000037239 -0.0000075615 -0.0000126842 0.0000870376 0.0000444682 0.0000917361 0.0000236379 -0.0000582265 -0.0000818349 0.0000488430 0.0000240026 0.0000584971 -0.0000099612 0.0000018644 0.0000003783 -0.0000515391 0.0001387848 0.0001406507 -0.0010867763 -0.0004447726 -0.0010335013 -0.0001964718 -0.0009260771 -0.0030382391 -0.0001583795 0.0000220372 0.0002907523 0.0000306022 -0.0000088584 -0.0000375262 -0.0000835039 -0.0000162604 0.0000573463 0.0000939813 0.0001402370 0.0001992366 0.0031352452 0.0117188717 0.0341187124 0.0036145122 0.0009295895 -0.0031437470 0.0000020604 -0.0000057477 0.0000056165 0.0000976967 -0.0001522475 -0.0003146749 0.0009832143 0.0001148178 -0.0011040956 0.0000033887 -0.0000012613 -0.0000016167 0.0000044430 0.0000005519 0.0000010549 -0.0000037037 -0.0000010618 -0.0000051182 -0.0000014210 -0.0000009984 -0.0000079728 -0.0002131475 0.0001061099 -0.0000100136 0.0000112853 0.0000317594 -0.0000092977 -0.0000438354 -0.0004975212 0.0002044254 0.0004715036 0.0001914595 -0.0001535569 0.0004334093 0.0058041315 -0.0023808092 -0.0053932933 -0.0023687806 0.0018181163 -0.0000162125 -0.0002490319 0.0001088222 -0.0004194438 0.0002908518 -0.0000296709 0.0001846192 0.0029281070 -0.0012091462 0.0050321448 -0.0033347484 0.0003164610 -0.0000100794 0.0004697234 -0.0003237684 0.0019263242 0.0016020012 0.0012586348 -0.0003324837 -0.0017549992 0.0007950418 0.0048757083 0.0054451708 0.0035404775 0.0035619337 0.0211615581 -0.0107297431 -0.0573653812 -0.0653391969 -0.0404664611 -0.0020339235 -0.0116094919 0.0065414238 -0.0059016327 0.0025713403 -0.0112282207 0.0252912543 0.1366169269 -0.0744629667 0.0689637736 -0.0300377936 0.1307691534 0.0000038618 -0.0000082637 0.0000019827 0.0000080209 0.0000227258 0.0000368322 -0.0000453232 0.0000240675 0.0000073811 -0.0000045809 0.0000507137 -0.0000726198 0.0000343714 0.0000316747 0.0000012812 -0.0001371756 0.0000528611 -0.0001787835 -0.0003314845 -0.0003064588 0.0002505333 -0.0000071880 -0.0001398807 -0.0000807843 -0.0044274847 -0.0012508877 0.0008356763 -0.0547085458 -0.9113198084 0.3550249219 0.0060184535 0.0801465886 -0.0312222790 -0.0000550884 -0.0000893650 0.0000561446 -0.0000291415 -0.0007601925 0.0003480403 0.0000306184 0.0000422231 -0.0000219396 0.0000069539 0.0000047381 -0.0000304439 -0.0012198255 -0.0054050478 0.0033859029 -0.0001968163 0.0000161294 -0.0002730352 0.0146800313 0.0617803912 -0.0379440589 -0.0000050016 0.0000089494 0.0000119799 0.0001522623 0.0001657872 -0.0000313452 -0.0000309554 -0.0000471999 -0.0000330430 0.0000270047 0.0000201246 -0.0000030421 0.0000166303 0.0000055413 0.0000302250 -0.0000180472 -0.0000055019 -0.0000161969 0.0000596302 -0.0000986367 -0.0000766772 -0.0000048997 0.0000062820 0.0000061237 -0.0000024367 -0.0000018539 0.0000011838 0.0000244060 0.0000044740 -0.0000113701 -0.0000046892 -0.0000113635 -0.0000007604 0.0000012704 0.0000013496 0.0000000702 -0.0000000831 0.0000045153 -0.0000006971 -0.0002841950 -0.0000674145 0.0001210009 0.0000594088 0.0001252909 0.0000054040 -0.0000166035 -0.0000020844 0.0000069313 0.0000014113 0.0000002873 0.0000004061 -0.0000037435 -0.0000009009 -0.0000017907 0.0000257337 0.0000276952 0.0000033102 0.0000005522 -0.0000003491 0.0000000706 0.0000017319 -0.0000059709 -0.0000016264 -0.0000095015 -0.0000160703 0.0000015141 0.0000060778 -0.0000005085 -0.0000024440 0.0000057841 0.0000104733 -0.0000012279 0.0000076917 0.0000009286 -0.0000030354 0.0001035420 0.0001774396 -0.0000168970 -0.0000695141 0.0000091165 0.0000216259 -0.0000601253 -0.0001057139 0.0000110780 -0.0000921958 -0.0000023785 0.0000369438 -0.0000269534 0.0000592643 0.0000193862 0.0000647737 0.0000002870 0.0000003755 -0.0010609977 -0.0000022923 -0.0000323712 -0.0000152853 -0.0000221495 0.0000202836 0.0000000017 0.0000016779 0.0000013669 -0.0000056281 -0.0000025390 0.0000014396 0.0000059566 0.0000015648 -0.0000005993 -0.0000056498 0.0000023238 0.0000032806 -0.0000068258 -0.0000533568 -0.0000874357 0.0000365633 0.0000712381 0.0000288260 -0.0000075156 0.0000008323 -0.0000033911 0.0000016648 -0.0000013818 -0.0000016266 0.0001088147 0.0000344817 -0.0000470415 -0.0001889779 0.0005512199 0.0008639862 0.0003294102 0.0001345255 0.0001375284 -0.0000295278 -0.0000724224 0.0000776052 0.0003308532 -0.0004152544 0.0000280752 -0.0006126935 -0.0000655292 0.0001072566 -0.0001715838 -0.0003686643 -0.0004786169 0.0000654735 -0.0000648476 0.0000124279 0.0000455919 0.0000380147 0.0000094371 -0.0000005878 -0.0000006701 -0.0000049824 -0.0000753165 -0.0004329896 0.0003482180 -0.0010375883 0.0000302559 0.0004192551 -0.0001768610 0.0000028738 -0.0002041578 0.0001120872 0.0002331064 -0.0000452085 0.0001190087 0.0001401185 0.0002542733 -0.0000218014 0.0000332685 0.0000372021 0.0000047215 -0.0000175490 -0.0000266912 0.0000269235 0.0000882356 0.0001344597 -0.0010374389 -0.0005751039 -0.0011342785 0.0007482917 -0.0024349001 -0.0024585355 0.0000545689 -0.0000052072 -0.0000625389 -0.0000023955 0.0000053014 -0.0000005220 0.0006343189 -0.0016991761 -0.0016922200 0.0133612581 0.0055771762 0.0127698892 -0.0000125543 -0.0000675690 -0.0002273584 -0.0000140216 0.0000006141 0.0000207229 0.0000058661 0.0000014794 -0.0000014622 -0.0000084967 -0.0000017650 0.0000053728 0.0000147259 0.0000141844 0.0000114894 0.0002316618 0.0008737512 0.0025653139 0.0002807439 0.0000716417 -0.0002409457 -0.0000068346 -0.0000044570 -0.0000030144 0.0000068839 -0.0000172326 -0.0000413753 0.0000048942 -0.0000245308 -0.0000325191 -0.0000017539 -0.0000030530 -0.0000026307 -0.0000012990 -0.0000013272 0.0000004625 0.0000014897 0.0000019362 0.0000019902 0.0000030080 0.0000007937 -0.0000007017 0.0027112430 -0.0013001284 0.0001438938 -0.0001336600 -0.0004938637 0.0002088253 0.0006507046 0.0084001365 -0.0034427994 -0.0076066513 -0.0032808021 0.0025416856 -0.0065192769 -0.0981589811 0.0401442270 0.0877415591 0.0384318849 -0.0295812228 0.0000909278 0.0019908818 -0.0007482603 0.0047466344 -0.0031130622 0.0002964357 -0.0012725398 -0.0234335278 0.0089832933 -0.0560420499 0.0369369392 -0.0035560655 -0.0000003927 0.0000413680 -0.0000301673 0.0001480394 0.0001171419 0.0000956045 -0.0000131473 -0.0000872360 0.0000236715 0.0003350258 0.0003629355 0.0002468003 0.0001509278 0.0010507592 -0.0004111488 -0.0038990233 -0.0044169858 -0.0027445742 -0.0001730234 -0.0009781899 0.0005486891 -0.0005012639 0.0002267115 -0.0009597607 0.0021456589 0.0115272817 -0.0062669169 0.0058738851 -0.0025512823 0.0111416623 -0.0000029617 0.0000021491 0.0000011718 -0.0000049911 -0.0000101038 -0.0000132780 0.0000435674 -0.0000194117 -0.0000085544 -0.0000020970 -0.0000023523 0.0000047788 0.0000185224 0.0000369524 -0.0000155760 0.0000571599 -0.0000354417 0.0000863276 -0.0002789302 -0.0002763447 0.0002192837 -0.0000243923 -0.0001387484 -0.0001101449 -0.0000066018 -0.0000031707 0.0000015626 -0.0000654977 -0.0010826834 0.0004203033 0.0000079463 0.0000954442 -0.0000370557 -0.0000027928 0.0000002040 0.0000001164 0.0000123496 0.0000047079 -0.0000027583 0.0000024902 -0.0000005342 0.0000029617 -0.0000006577 0.0000001468 -0.0000008454 -0.0000153263 -0.0000673400 0.0000429772 -0.0000028685 0.0000004121 -0.0000042620 0.0001860233 0.0007656552 -0.0004748916 -0.0000059788 0.0000032139 -0.0000005552 -0.0000107393 -0.0000022040 0.0000052869 0.0000080056 -0.0000008196 -0.0000067450 -0.0000086123 0.0000036154 0.0000119894 -0.0000020389 -0.0000009346 0.0000055224 -0.0002740318 -0.0002223370 -0.0000226803 0.0000136845 -0.0000229111 -0.0000194661 0.0000012893 0.0000066176 0.0000018045 0.0000118355 -0.0000155287 -0.0000122042 -0.0000009414 -0.0000043665 -0.0000005471 -0.0000021575 0.0000055191 0.0000040838 0.0000247771 0.0000043108 -0.0000144424 -0.0000071946 -0.0000007211 0.0000040613 0.0000226233 0.0000043939 -0.0000183438 -0.0000203311 -0.0000354463 -0.0000028197 -0.0002711490 -0.0000727463 0.0001406646 -0.0000183366 0.0000070277 0.0000424376 -0.0000976570 -0.0000558605 -0.0000965224 0.0013117261 0.0014058505 0.0003174260 -0.0000179801 -0.0000361084 -0.0000081164 -0.0004963650 0.0008516443 0.0003862781 -0.0002782709 -0.0003980260 0.0000950003 0.0002779401 0.0000568930 -0.0000934321 -0.0001206717 -0.0003061875 0.0000645799 0.0018362503 0.0000331972 -0.0007387574 0.0030880659 0.0052018839 -0.0004018136 -0.0029301471 -0.0001109304 0.0012341854 0.0019146807 0.0033622582 -0.0005030958 -0.0206817031 -0.0003200624 0.0087470914 0.0055313881 -0.0110972996 -0.0038959353 0.0000044236 0.0000020908 0.0000032264 -0.0000383471 -0.0000047363 -0.0000345379 0.0000020179 -0.0000002627 -0.0000009248 0.0001082818 0.0002090889 0.0002063606 -0.0001732830 -0.0012517041 -0.0008438302 0.0000564210 0.0003768691 0.0001749800 0.0001080588 -0.0000006081 -0.0000369816 -0.0000419320 0.0000842037 0.0001882075 -0.0001223027 0.0000205517 0.0000354914 0.0003306335 -0.0000758362 -0.0000100316 0.0004553256 0.0002251658 -0.0000917129 -0.0864459730 -0.0223011639 0.0345453508 0.0002838254 -0.0010823420 -0.0016148902 -0.0004540884 -0.0001137386 -0.0001386687 0.0002904653 0.0002983847 -0.0004679484 0.0003369376 -0.0004686026 -0.0000302327 0.0009093886 0.0002001261 -0.0000358795 -0.0000141357 -0.0000719713 -0.0000665539 -0.0018482181 0.0026423934 -0.0006319189 -0.0027436718 -0.0012829355 -0.0002505845 -0.0000045808 -0.0004614615 0.0011781367 0.0491747195 0.2960062257 -0.2404104167 0.8254018246 -0.0233862665 -0.3335673195 0.1445798171 -0.0043343334 0.1679056548 0.0000027660 -0.0000018031 -0.0000015208 0.0000006829 0.0000014992 0.0000033298 -0.0000118016 -0.0000045605 -0.0000094930 0.0000016531 -0.0000012407 -0.0000000767 -0.0000042776 0.0000056815 0.0000061217 0.0000224597 0.0000074604 0.0000235439 0.0000145472 -0.0000269545 -0.0000362732 0.0001096814 0.0000635507 0.0001039863 -0.0000189215 0.0000011548 -0.0000079719 0.0000226876 -0.0000450435 -0.0000771711 -0.0002364856 -0.0000940952 -0.0002590943 0.0000028848 0.0000153571 0.0000390631 -0.0000076554 -0.0000022068 0.0000042145 0.0000017460 0.0000004119 -0.0000005702 -0.0000009710 0.0000001894 0.0000013526 -0.0000027436 -0.0000000353 0.0000032545 -0.0000229972 -0.0001812752 -0.0004551672 0.0000575482 0.0000029268 -0.0000481099 -0.0000035386 -0.0000038736 -0.0000020819 0.0000040535 -0.0000059728 -0.0000083707 0.0000397078 0.0000033838 -0.0000340655 0.0000050037 -0.0000013263 0.0000027211 0.0000099093 0.0000020923 0.0000037857 0.0000010684 0.0000019682 0.0000015624 0.0000016019 0.0000017835 0.0000000074 0.0000025146 -0.0000020809 0.0000003726 0.0000019868 -0.0000003978 -0.0000004605 0.0000027047 0.0000142273 -0.0000060303 -0.0000404168 -0.0000169443 0.0000132985 -0.0000102317 -0.0001709207 0.0000683612 0.0004515837 0.0001969095 -0.0001529694 0.0000003067 0.0000237669 -0.0000083484 0.0000060599 -0.0000038578 0.0000003019 -0.0000036619 -0.0002741014 0.0000956210 -0.0000863758 0.0000569464 -0.0000062343 0.0000002221 0.0000002840 0.0000002362 0.0000022108 0.0000017286 0.0000015368 0.0000001874 0.0000050849 -0.0000025186 0.0000091113 0.0000093522 0.0000080243 -0.0000031898 -0.0000476486 0.0000205551 -0.0001062572 -0.0001238015 -0.0000793520 0.0000002920 -0.0000038195 0.0000043183 -0.0000231131 0.0000087448 -0.0000422984 0.0000135084 0.0000605265 -0.0000358104 0.0002579061 -0.0001089658 0.0004813615 0.0001396026 -0.0001131190 0.0000266334 0.0000296201 0.0002188797 0.0002603594 -0.0017470365 0.0009264520 0.0002825478 -0.0000969419 0.0004829522 -0.0006534957 -0.0000193060 -0.0000875267 0.0000303890 -0.0001456871 -0.0000624871 -0.0002572232 0.0005222538 0.0005451868 -0.0005021182 0.0001499582 0.0004135403 0.0002999625 0.0000001557 0.0000002126 -0.0000002550 0.0000032788 0.0000827878 -0.0000322964 -0.0000006439 -0.0000073929 0.0000027839 -0.0000003435 -0.0000001901 0.0000000910 0.0000008275 0.0000008595 -0.0000001196 -0.0000004093 0.0000000496 -0.0000004802 0.0000003025 0.0000002853 0.0000001079 -0.0000022857 -0.0000111302 0.0000068249 -0.0000006404 -0.0000002856 -0.0000005434 0.0000296581 0.0001299822 -0.0000812083 0.0000005967 0.0000003487 0.0000003964 -0.0000004136 0.0000008473 0.0000008396 -0.0000008613 -0.0000015094 -0.0000003869 0.0000016772 0.0000031162 0.0000005450 0.0000008862 0.0000008713 0.0000003468 0.0006566571 0.0010877193 0.0000278014 -0.0006817399 0.0010936901 0.0007915239 0.0000553133 -0.0000965724 -0.0000671074 -0.0000001555 0.0000174547 0.0000077427 -0.0000345139 -0.0000008148 0.0000199469 0.0000717710 0.0001194735 -0.0000030168 -0.0004609538 -0.0001163298 0.0002615085 0.0000001423 -0.0000093590 -0.0000016750 0.0004284792 0.0000899429 -0.0002293518 -0.0007242373 -0.0015887757 -0.0000837424 0.0052022737 0.0013221769 -0.0029872714 -0.0001284493 -0.0000540398 0.0000829066 0.0010975342 0.0012273057 0.0000355763 -0.0125019234 -0.0133339633 -0.0005659305 0.0012895186 -0.0007257934 -0.0006561413 -0.0200765902 0.0383194190 0.0137986061 -0.0212770297 -0.0326347753 0.0040051817 0.0058129002 0.0012433524 -0.0025157750 -0.0096449008 -0.0188086992 0.0018920599 0.0511818221 0.0004041973 -0.0212352716 0.2325446559 0.3948843904 -0.0394942433 -0.0714937889 -0.0038881183 0.0321986336 0.1260712194 0.2181135316 -0.0288602017 -0.6013220444 -0.0074239764 0.2489650445 0.2277448535 -0.4569311379 -0.1590908659 0.0000145754 0.0000080262 0.0000013503 -0.0002010931 -0.0000267814 -0.0000030671 -0.0000006696 -0.0000005044 0.0000001587 -0.0000289326 0.0000538797 -0.0000127745 -0.0000773706 -0.0000410251 -0.0000084475 0.0000314962 0.0000307670 -0.0000038172 -0.0000085020 -0.0000078867 0.0000052107 -0.0000037403 0.0000012832 0.0000085896 -0.0001401245 0.0003205636 0.0001166788 0.0000035909 -0.0000044089 0.0000034227 0.0000196132 0.0000275634 0.0000470848 0.0023052668 0.0003010286 -0.0007396748 0.0000009429 -0.0000536255 -0.0000627853 0.0000518573 0.0000156638 0.0000169517 0.0000177440 0.0000662452 -0.0000882351 0.0020929022 -0.0027053459 0.0003704928 0.0005699204 0.0002278483 -0.0000429065 -0.0004027465 -0.0013743103 -0.0015705287 -0.0000285919 0.0000438936 0.0000264226 -0.0000015552 0.0000140190 0.0000038828 0.0000115223 0.0000318990 -0.0001036510 -0.0006990186 -0.0048974842 0.0042959095 -0.0217607079 0.0005607192 0.0090927747 -0.0044704676 0.0003054635 -0.0048435682 0.0000005638 -0.0000018943 -0.0000029781 0.0000016569 0.0000025002 0.0000059503 -0.0000244519 -0.0000108802 -0.0000205402 0.0000057024 0.0000044639 -0.0000207841 0.0000045735 -0.0000120911 -0.0000128743 0.0000367979 0.0000148815 0.0000385443 0.0000277408 -0.0000734549 -0.0000678963 0.0003107013 0.0001477195 0.0002587957 -0.0000069790 0.0000943481 0.0001365536 -0.0000838210 0.0001573061 0.0001417947 -0.0004341200 -0.0001802864 -0.0004428156 0.0000007284 0.0000002015 0.0000001141 0.0000026422 0.0000002672 -0.0000030428 0.0000010948 0.0000005085 0.0000006311 0.0000001632 0.0000012260 0.0000043206 0.0000029791 0.0000007581 -0.0000024547 -0.0000026602 -0.0000012134 -0.0000058895 -0.0000379827 -0.0000010306 0.0000277266 -0.0000034909 0.0000010956 0.0000021671 -0.0000076183 -0.0000130763 -0.0000484685 -0.0000328011 -0.0000086265 0.0000282459 0.0000052009 -0.0000688862 -0.0000470584 -0.0000500064 -0.0000476925 -0.0000263002 0.0000005744 -0.0000007726 -0.0000011754 0.0000024916 -0.0000008924 -0.0000009389 -0.0000011892 -0.0000000696 0.0000001771 -0.0000002381 0.0000000548 0.0000000280 -0.0000006125 0.0000211006 -0.0000082791 0.0000267691 0.0000085582 -0.0000078402 -0.0000085639 -0.0002280660 0.0000916223 -0.0002924642 -0.0001215099 0.0000955008 0.0000012879 -0.0000102470 0.0000035201 -0.0000372507 0.0000236140 -0.0000020643 0.0000038115 0.0001290550 -0.0000491931 0.0004256931 -0.0002807652 0.0000266116 -0.0000001424 -0.0000000891 -0.0000001266 0.0000005758 0.0000002879 0.0000007207 -0.0000012742 -0.0000031629 0.0000002921 0.0000205189 0.0000230591 0.0000146266 0.0000072980 0.0000417509 -0.0000195658 -0.0002315196 -0.0002639524 -0.0001632844 0.0000028912 0.0000134464 -0.0000068609 -0.0000033862 -0.0000005152 -0.0000049865 -0.0000297656 -0.0001475425 0.0000771098 0.0000332422 -0.0000103552 0.0000593373 -0.0008889062 0.0006507961 0.0002071902 -0.0002536102 -0.0019439848 -0.0027297116 0.0107609519 -0.0052256150 -0.0014605109 0.0005068088 -0.0015287646 0.0020517168 0.0000069066 0.0000009433 0.0000125162 0.0000675508 -0.0000648150 0.0000234576 0.0000117324 0.0000217895 -0.0000501707 0.0000113192 -0.0000830186 -0.0000710236 0.0000870298 0.0000882760 -0.0000341896 0.0013581694 0.0441744850 -0.0170335699 -0.0002719765 -0.0038966128 0.0015222870 0.0001217566 0.0000248102 -0.0000151111 -0.0000358570 0.0001598069 -0.0000597257 -0.0000063973 -0.0000243719 -0.0000112129 0.0000267109 -0.0000081676 -0.0000257272 -0.0000635486 -0.0003102699 0.0002077139 -0.0000096620 0.0000183168 -0.0000213809 0.0009401775 0.0036656146 -0.0021693317 0.0000021936 -0.0000015990 0.0000047227 -0.0000074082 -0.0000118111 -0.0000012074 0.0000010541 0.0000047446 0.0000017893 -0.0000010831 -0.0000020868 0.0000001435 -0.0000009250 -0.0000019609 -0.0000008024 -0.0000094770 -0.0000130919 0.0000069347 0.0000578279 -0.0000853500 -0.0000662973 -0.0000059173 0.0000077848 0.0000057661 -0.0000002618 -0.0000008667 -0.0000004749 0.0000018498 0.0000001686 -0.0000015548 0.0000079322 0.0000173044 0.0000010739 0.0000167007 0.0000032398 -0.0000098486 -0.0000005005 -0.0000002353 0.0000002963 -0.0000260192 -0.0000048349 0.0000154314 -0.0000868843 -0.0001788787 -0.0000165119 -0.0001836498 -0.0000460081 0.0001039015 0.0000010269 0.0000014773 -0.0000002171 -0.0000017431 -0.0000031686 0.0000001747 0.0000224883 0.0000308494 0.0000042819 0.0000004163 0.0000002020 -0.0000002290 -0.0000198259 0.0000407924 0.0000141140 -0.0000062396 -0.0000085978 0.0000012768 -0.0000021380 0.0000010083 0.0000010513 -0.0000146977 -0.0000280927 0.0000030623 0.0000262735 -0.0000010034 -0.0000110460 0.0000661925 0.0001125765 -0.0000124450 0.0000182136 -0.0000048426 -0.0000036395 0.0001855176 0.0003153003 -0.0000398487 -0.0003134288 -0.0000050516 0.0001315607 0.0002341095 -0.0004768977 -0.0001616360 -0.0000059742 -0.0000001559 -0.0000002352 0.0001036928 0.0000134617 0.0000079961 -0.0000033138 -0.0000043214 0.0000012920 -0.0000002360 -0.0000000957 -0.0000001934 0.0000009514 0.0000000622 -0.0000002356 -0.0000006767 -0.0000001756 0.0000003142 0.0000005662 -0.0000004988 -0.0000008508 -0.0000003259 0.0000033924 0.0000067588 -0.0000009191 -0.0000142511 -0.0000064539 0.0000014979 0.0000036829 -0.0000024522 -0.0000005707 0.0000001358 0.0000006534 0.0000156167 0.0000052041 -0.0000094900 0.0000100116 -0.0000384811 -0.0000572612 -0.0000229799 -0.0000116932 -0.0000064748 0.0000118247 0.0000086237 -0.0000170337 -0.0000626333 0.0000851220 -0.0000090241 0.0000415854 0.0000057618 -0.0000069860 0.0000292542 0.0000825355 0.0001025485 0.0000093630 -0.0000133305 0.0000034753 -0.0000223504 -0.0000150820 -0.0000031261 -0.0000092860 -0.0000206161 0.0000416751 -0.0000132853 -0.0000748590 0.0000602073 -0.0001583144 0.0000008000 0.0000650133 -0.0000112909 -0.0000019669 -0.0000138972 0.0000157898 -0.0000494928 -0.0000029590 -0.0000197547 0.0000026337 -0.0000139411 0.0000030539 -0.0000049198 -0.0000034435 -0.0000077531 0.0000030246 0.0000004357 -0.0000022354 -0.0000217293 -0.0000314058 0.0002882443 0.0001403903 0.0003045150 -0.0000209172 0.0001287209 0.0001487666 -0.0000343818 -0.0000015932 -0.0000042541 0.0000073125 -0.0000037642 -0.0000012313 -0.0001569150 0.0003958075 0.0004132274 -0.0035042090 -0.0014789219 -0.0034944889 -0.0000019660 -0.0000136403 -0.0000428407 0.0000018559 0.0000012165 -0.0000002072 0.0000004591 0.0000003901 0.0000005358 -0.0000012982 -0.0000015762 -0.0000039098 0.0000043151 0.0000024591 -0.0000011776 0.0000382753 0.0001651087 0.0004875184 -0.0000002589 -0.0000019885 -0.0000023118 0.0000010855 -0.0000003181 -0.0000005108 0.0000094524 0.0000145428 0.0000446524 -0.0000177539 -0.0000084083 0.0000179814 -0.0000018017 0.0000022210 0.0000023483 -0.0000024107 0.0000005960 -0.0000006310 -0.0000001707 0.0000000167 -0.0000000126 -0.0000005799 0.0000001667 -0.0000000457 0.0012165112 0.0003896080 -0.0003216438 0.0004441029 0.0000726451 -0.0001369076 0.0000224732 -0.0354098537 0.0140196854 -0.0256429818 -0.0066147314 0.0068615822 0.0137762005 0.3921470961 -0.1581354539 0.2746311768 0.1135037931 -0.0900355955 -0.0018023858 0.0219773719 -0.0077710600 0.0576066764 -0.0372621187 0.0034398152 -0.0093967721 -0.2669882273 0.1015751985 -0.6597452810 0.4378294828 -0.0431210434 0.0000910328 0.0000250230 -0.0001039592 -0.0000474177 -0.0000340509 -0.0000580523 0.0003040521 0.0009971436 -0.0003937233 -0.0027515317 -0.0031326573 -0.0019580394 -0.0022413413 -0.0118605290 0.0058408830 0.0316720596 0.0362318863 0.0221982743 -0.0005595318 -0.0025129567 0.0012335076 0.0008141482 0.0000032288 0.0012646468 0.0055547716 0.0278887950 -0.0146726187 -0.0078920705 0.0030107143 -0.0146433566 -0.0000041413 0.0000040242 0.0000036207 -0.0000002955 -0.0000273504 -0.0000369678 0.0000535693 -0.0000306652 -0.0000064441 0.0000003000 0.0000015162 -0.0000061130 0.0000039334 0.0000047149 0.0000043979 -0.0000247521 0.0000139452 -0.0000327684 -0.0000188004 -0.0000192135 0.0000125676 -0.0000077390 -0.0000532651 -0.0000385549 0.0000035746 0.0000058366 0.0000009267 -0.0000526293 -0.0021493887 0.0008175309 0.0000039635 0.0001945646 -0.0000720642 0.0000041414 -0.0000134266 -0.0000085681 0.0000076770 -0.0000368405 0.0000067192 0.0000632948 0.0001575788 -0.0000655775 -0.0001031024 -0.0000328575 -0.0000912197 -0.0008620207 -0.0037512356 0.0023398822 -0.0000468284 0.0000794677 -0.0001022165 0.0111121842 0.0429284165 -0.0251514977 0.0000034629 -0.0000074787 0.0000028131 0.0000038604 0.0000046603 0.0000010445 -0.0000044402 -0.0000009977 -0.0000004894 0.0000041525 0.0000008492 -0.0000015676 0.0000021175 0.0000005314 0.0000015873 0.0000128104 0.0000274682 -0.0000000078 -0.0000942490 0.0001541644 0.0001096140 0.0000066691 -0.0000142023 -0.0000092579 -0.0000003045 0.0000008004 0.0000002762 0.0000024850 0.0000018994 -0.0000009078 0.0000154077 0.0000325369 0.0000018780 -0.0000137503 -0.0000045446 0.0000074494 -0.0000010819 -0.0000019149 -0.0000004033 -0.0000276736 -0.0000085862 0.0000089271 -0.0001768087 -0.0003698697 -0.0000277958 0.0001666010 0.0000419501 -0.0000941305 0.0000001955 -0.0000019621 -0.0000010595 0.0000024593 0.0000030266 0.0000034153 -0.0000377187 -0.0000432321 -0.0000076945 -0.0000008688 -0.0000005828 0.0000000270 -0.0000153266 0.0000313986 0.0000108447 0.0000100552 0.0000187325 -0.0000014634 0.0000067822 0.0000013744 -0.0000029168 -0.0000118688 -0.0000226717 0.0000025006 0.0000208237 -0.0000017798 -0.0000088903 -0.0001163751 -0.0001986074 0.0000183730 -0.0000840642 -0.0000094417 0.0000391720 0.0001454305 0.0002561080 -0.0000319311 -0.0002387341 -0.0000007474 0.0000998899 0.0001797011 -0.0003634308 -0.0001251994 0.0000113281 0.0000019735 -0.0000001721 -0.0001694301 -0.0000069049 0.0000037284 -0.0000379596 -0.0000457143 0.0000255917 -0.0000002055 -0.0000009039 -0.0000022272 -0.0000007794 0.0000013914 0.0000018339 0.0000000027 0.0000012046 -0.0000006726 0.0000003685 -0.0000038610 0.0000012647 -0.0000057867 -0.0000192545 -0.0000237000 0.0000149075 -0.0000020841 -0.0000026977 0.0000003442 -0.0000012573 0.0000039350 0.0000008811 0.0000000864 -0.0000007447 -0.0000163148 -0.0000089641 0.0000137463 -0.0000672565 0.0002158634 0.0003304458 0.0000484974 -0.0000128041 0.0000379311 0.0000736986 0.0000552493 -0.0000797503 -0.0000632359 0.0000852210 -0.0000160575 -0.0001252666 -0.0000382310 0.0000222296 -0.0000005947 0.0000057350 0.0000121941 -0.0000240562 0.0000279669 -0.0000032929 0.0000011338 -0.0000008939 0.0000006073 0.0000120544 0.0000101198 -0.0000457348 0.0000195263 0.0001114951 -0.0000934862 0.0001762191 -0.0000066661 -0.0000687652 -0.0000037793 -0.0000045616 0.0000019008 -0.0000015502 0.0000030444 -0.0000006691 0.0000019687 0.0000005822 0.0000021689 -0.0000018247 0.0000006865 -0.0000003030 0.0000021710 -0.0000013091 -0.0000003951 -0.0000000965 0.0000008977 0.0000010187 -0.0000097941 -0.0000060806 -0.0000113663 0.0000038365 -0.0000206954 -0.0000194054 0.0000179917 0.0000055753 0.0000151743 -0.0000052412 0.0000006633 -0.0000003921 0.0000008036 -0.0000139501 -0.0000142039 0.0001161867 0.0000528771 0.0001193311 -0.0000266918 -0.0001660485 -0.0005214900 -0.0000299487 0.0000014062 0.0000411290 0.0000095048 0.0000046915 0.0000027201 -0.0000065777 -0.0000004838 0.0000112531 -0.0000025766 0.0000123287 0.0000310900 0.0004824471 0.0020700934 0.0060081169 0.0005852697 0.0001334675 -0.0004851361 -0.0000082065 -0.0000050205 -0.0000011091 0.0000112523 -0.0000300904 -0.0000869109 0.0002594742 0.0000519122 -0.0002716144 0.0000015808 -0.0000003711 -0.0000004805 0.0000025303 0.0000004179 0.0000009622 0.0000014407 0.0000013892 0.0000013720 0.0000033671 0.0000010479 -0.0000023477 -0.0000946649 -0.0000620214 0.0000297641 -0.0000535435 -0.0000031594 -0.0000991556 0.0000113667 0.0023580142 -0.0009286625 0.0018969908 0.0005474574 -0.0005238763 -0.0008954658 -0.0259752852 0.0104625062 -0.0204651471 -0.0084901528 0.0067094019 0.0001558713 -0.0013073136 0.0003945629 -0.0038061590 0.0024020466 -0.0002099661 0.0005420675 0.0160397272 -0.0060340885 0.0432491351 -0.0286881938 0.0027794806 -0.0000275195 0.0001823652 -0.0002379388 -0.0007725647 0.0001793810 -0.0012956526 0.0038779422 0.0135216056 -0.0040620142 -0.0412826225 -0.0462221436 -0.0297981472 -0.0297500074 -0.1636117676 0.0793066808 0.4722283234 0.5404896319 0.3318986060 -0.0083535011 -0.0381762099 0.0188313163 0.0142180917 -0.0011448486 0.0229100859 0.0841027704 0.4215709440 -0.2214113523 -0.1416705888 0.0548767564 -0.2632472319 0.0000005772 -0.0000030627 0.0000014480 0.0000020439 0.0000099323 0.0000145587 -0.0000035784 0.0000006389 0.0000007071 -0.0000034729 0.0000243336 -0.0000326389 0.0000060798 0.0000035244 0.0000010274 -0.0000332468 0.0000184855 -0.0000359886 -0.0000495106 -0.0000332163 0.0000412072 -0.0000087013 -0.0000223819 -0.0000112675 0.0000024551 0.0000033317 -0.0000008818 0.0000070595 0.0001484135 -0.0000613936 -0.0000023234 -0.0000138649 0.0000052835 0.0000037465 0.0000000569 -0.0000011176 -0.0000186527 -0.0000055299 0.0000046115 -0.0000078766 0.0000044855 -0.0000149478 0.0000020071 0.0000010371 0.0000030051 0.0000070097 0.0000343469 -0.0000218113 0.0000038919 0.0000016263 0.0000027621 -0.0000901656 -0.0004106328 0.0002652317 0.0000195877 -0.0000138304 0.0000079175 0.0000219366 0.0000130604 0.0000114205 -0.0000360078 -0.0000026576 -0.0000232516 0.0000216660 0.0000020246 0.0000223172 0.0000792460 0.0000453126 0.0000416309 -0.0020084735 -0.0028630182 0.0001540366 0.2888538449 -0.4629020790 -0.3360601700 -0.0248695709 0.0396922846 0.0289207390 -0.0004880832 -0.0023631240 -0.0004534970 0.0206853390 0.0028350415 -0.0115613777 -0.0128480103 -0.0286003740 -0.0017245835 0.0430415235 0.0115318496 -0.0241304113 -0.0006443600 0.0007563639 0.0006397013 -0.2483779388 -0.0539683706 0.1312825589 0.1581662640 0.3521368861 0.0204298906 -0.4994469098 -0.1215493992 0.2859513264 0.0005279413 0.0004384964 -0.0002582339 -0.0037206439 -0.0046443495 -0.0002896023 0.0406793187 0.0510766319 0.0042484781 -0.0001061503 0.0001232407 0.0000502749 -0.0002683239 0.0005392593 0.0001880118 0.0001413593 0.0002849142 -0.0000124202 -0.0001088487 0.0000245477 0.0000543712 -0.0000979520 -0.0002045793 0.0000174051 0.0004497027 -0.0000408941 -0.0001914141 -0.0016434018 -0.0029686117 0.0002038780 0.0013424907 0.0000646838 -0.0006126123 0.0013023440 0.0022094781 -0.0003148478 -0.0050672699 -0.0000543617 0.0020929488 0.0031118780 -0.0062503271 -0.0021852402 0.0005571518 0.0001780420 -0.0000473747 -0.0074420589 -0.0010943116 0.0000302146 -0.0000013230 -0.0000036859 0.0000027582 0.0000264549 0.0000523635 0.0001066311 0.0000119268 -0.0000331800 0.0000030088 -0.0000049377 -0.0000028572 -0.0000021740 0.0000069779 0.0000068838 -0.0000048287 0.0000028462 0.0000338296 0.0000566554 0.0000621084 0.0001473024 0.0001353557 0.0000051421 -0.0000022473 0.0000021274 -0.0000061194 0.0000021956 0.0000002841 0.0000499758 0.0000011548 -0.0000036784 0.0001388531 -0.0003653850 -0.0006118636 -0.0002133641 -0.0000809546 -0.0000738210 0.0000163399 0.0000193051 0.0000112471 0.0002491938 -0.0003083353 0.0000482128 -0.0006297114 -0.0001729631 0.0000760729 -0.0003862388 -0.0013730490 -0.0017657121 -0.0000248925 0.0000354904 -0.0000154986 -0.0000522266 -0.0000252107 -0.0000168607 -0.0000051231 0.0000015064 0.0000365668 0.0000055185 -0.0000385801 0.0000415360 -0.0004263326 0.0000120349 0.0001773989 -0.0001535351 0.0000141069 -0.0001729159 -0.0000032344 -0.0000030607 -0.0000047422 0.0000050607 0.0000025858 0.0000035786 -0.0000300275 -0.0000071880 -0.0000245092 0.0000022144 -0.0000005515 -0.0000010620 0.0000042238 -0.0000137685 -0.0000138797 0.0000492045 0.0000230575 0.0000531609 -0.0000241800 -0.0000659563 -0.0000363591 0.0002802214 0.0000212082 0.0002440441 0.0000069304 -0.0000057279 -0.0000077738 -0.0000584673 0.0001847703 0.0001854902 -0.0005731592 -0.0002326103 -0.0005808689 0.0000059643 0.0000046141 0.0000015460 0.0000079963 -0.0000056207 -0.0000120779 -0.0000271803 0.0000139760 0.0000119728 -0.0000657998 -0.0001397150 -0.0005156698 -0.0001336442 -0.0000337152 0.0001326503 -0.0000029581 -0.0000190729 -0.0001036723 -0.0000494075 -0.0000296290 0.0000251791 -0.0000787173 -0.0000022916 0.0000684712 0.0010194586 0.0016869811 0.0060633538 0.0017467863 0.0005241112 -0.0015901374 -0.0000039992 0.0000026212 0.0000050078 -0.0000028420 0.0000011421 0.0000027942 0.0000316068 -0.0000313653 -0.0000033114 0.0000570541 -0.0000200711 -0.0000326939 -0.0000001472 0.0000004583 -0.0000002657 -0.0000008501 -0.0000012893 0.0000007643 -0.0000021622 0.0000069145 -0.0000025741 0.0000364010 0.0000143652 -0.0000117794 -0.0000023858 -0.0000734398 0.0000267057 -0.0003944388 -0.0001708167 0.0001308883 -0.0000005804 -0.0000060316 0.0000024034 0.0000020646 -0.0000022647 0.0000004557 0.0000070012 0.0000767232 -0.0000315455 -0.0000108523 0.0000111835 -0.0000008133 -0.0000014953 -0.0000003955 -0.0000014790 -0.0000014878 -0.0000009481 -0.0000007941 0.0000024391 0.0000097559 -0.0000031770 -0.0000099544 -0.0000100094 -0.0000078222 -0.0000230163 -0.0001071111 0.0000466907 0.0001149311 0.0001350178 0.0000814504 -0.0000048341 -0.0000187171 0.0000084107 0.0000173409 -0.0000055498 0.0000316498 0.0000425234 0.0002006608 -0.0000967958 -0.0001862570 0.0000825055 -0.0003488614 -0.0003451166 0.0010054071 0.0012411629 -0.0010191930 -0.0103441510 -0.0137977743 0.0058724254 -0.0030230477 -0.0007862180 -0.0003493324 0.0012036014 -0.0015235677 0.0001241731 0.0003721068 0.0002744603 -0.0006431075 0.0002166940 -0.0009570732 -0.0004399569 -0.0007558767 0.0003699925 -0.0002390528 -0.0040282869 -0.0030268558 0.0000700885 -0.0001285385 -0.0001948972 0.0012591401 0.0180422691 -0.0076051937 -0.0000073638 -0.0016238888 0.0006817027 -0.0000555881 -0.0000030113 0.0000084987 0.0001343985 -0.0000642411 0.0000224550 -0.0000100166 0.0000036101 -0.0000147872 0.0000096264 -0.0000024180 0.0000004975 -0.0000024973 -0.0000090741 0.0000037738 0.0000001427 -0.0000020162 0.0000028051 0.0000260215 0.0001030121 -0.0000648793 0.0000167346 -0.0000072759 0.0000144289 0.0000189049 0.0000016754 0.0000177641 -0.0000166337 0.0000130329 -0.0000302374 0.0000013612 -0.0000055231 0.0000140301 0.0000090335 -0.0000311443 0.0000309591 -0.0000801271 -0.0001616849 -0.0000047010 -0.0003366947 0.0005318666 0.0003847401 0.0000331830 -0.0000443088 -0.0000351501 -0.0000030841 -0.0000099525 -0.0000023071 -0.0000408314 -0.0000097851 0.0000219190 -0.0000402876 -0.0000705288 0.0000011451 0.0001664006 0.0000450751 -0.0000928675 0.0000021403 0.0000097304 0.0000009697 0.0004863358 0.0001191707 -0.0002499303 0.0003952976 0.0008521091 0.0000473241 -0.0019243178 -0.0004665912 0.0010999345 0.0000069410 0.0000197432 0.0000035641 0.0000176372 0.0000275672 -0.0000036672 -0.0002885575 -0.0002994554 0.0000062095 0.0000673425 0.0000008052 -0.0000273931 0.0004585008 -0.0010914362 -0.0003447775 -0.0008439701 -0.0013929833 0.0001436609 -0.0004087258 -0.0000667682 0.0001791607 0.0006976465 0.0012676734 -0.0001469428 0.0005281256 0.0001130982 -0.0002020438 0.0093961004 0.0160546440 -0.0015791329 0.0049795661 0.0002866398 -0.0022604634 -0.0082773052 -0.0143771066 0.0018824085 -0.0060657219 -0.0001965057 0.0024875221 -0.0059173688 0.0120901485 0.0041572261 -0.0000369192 -0.0000130162 0.0000014783 0.0005722352 0.0001759253 -0.0000326397 0.0000010589 -0.0000000451 -0.0000034362 0.0000004711 0.0000051610 0.0000065445 -0.0000116447 -0.0000127068 -0.0000052052 0.0000131509 0.0000072085 0.0000051680 -0.0000130003 -0.0000046560 -0.0000135336 -0.0000178626 0.0000073302 0.0000421002 -0.0001059744 0.0000406020 0.0000405914 -0.0000254927 0.0000008957 0.0000098432 0.0000024509 0.0000021944 0.0000040642 -0.0000366010 -0.0000129386 -0.0000019901 0.0000467533 -0.0002021956 -0.0003405857 0.0001194211 -0.0000009962 0.0000614494 0.0001018280 0.0001250644 -0.0001553497 0.0006329739 -0.0007011072 0.0000419203 0.0006064676 0.0003545799 -0.0004530131 0.0000790169 -0.0000664545 -0.0000802226 0.0001237751 -0.0001328425 -0.0000019611 0.0001646840 0.0000955273 0.0000945728 0.0000666639 0.0000701178 -0.0001030159 0.0000181784 0.0001325821 -0.0001060573 0.0002495786 -0.0000070278 -0.0000986189 0.0001622176 -0.0000016399 0.0001922356 -0.0013978668 0.0027466717 0.0022011484 0.0002704944 0.0004211048 0.0006327843 -0.0006842378 -0.0005929951 -0.0009601612 -0.0002253148 0.0002036656 0.0000777685 0.0001461849 0.0082651255 0.0099625863 -0.0580200105 -0.0244984891 -0.0591190393 0.0005799535 -0.0044748347 -0.0044248011 0.0109213442 0.0051585881 0.0103521373 0.0000941462 0.0000938796 0.0001626420 0.0385606430 -0.1119034694 -0.1142848609 0.6613637896 0.2741431489 0.6716437386 0.0000064228 0.0000297019 0.0000833997 0.0000103049 0.0000009321 -0.0000134261 0.0000017025 0.0000010985 0.0000003774 -0.0000003534 -0.0000006620 0.0000000023 -0.0000020697 -0.0000001549 0.0000030784 -0.0000691444 -0.0003378850 -0.0009490738 -0.0001587791 -0.0000330463 0.0001360418 -0.0000027071 -0.0000006616 -0.0000015798 -0.0000041287 0.0000063629 0.0000040224 0.0000287146 0.0000120068 -0.0000324239 -0.0001252099 -0.0000370510 -0.0000910854 -0.0000358759 -0.0000186792 -0.0000314698 0.0000007792 0.0000002549 0.0000011939 0.0000012816 -0.0000002008 0.0000003028 -0.0000076097 0.0000390923 -0.0000022045 0.0000267165 0.0000209567 -0.0000129477 -0.0000270331 -0.0002186444 0.0000941463 0.0000606511 0.0000339757 -0.0000238300 0.0001637127 0.0024429097 -0.0010127342 -0.0006702293 -0.0003305086 0.0002324220 -0.0000224331 0.0001140199 -0.0000400757 0.0002767204 -0.0001722057 0.0000141958 -0.0000474141 -0.0013564863 0.0005212961 -0.0030707066 0.0020513957 -0.0002080204 -0.0000002063 -0.0000002177 -0.0000022291 0.0000005147 0.0000002594 0.0000023466 0.0000041774 0.0000282046 -0.0000138834 -0.0000150005 -0.0000191068 -0.0000076621 -0.0000296184 -0.0003345364 0.0001696813 0.0001834322 0.0002072334 0.0001229728 0.0000016608 0.0000070505 -0.0000030629 -0.0000149768 0.0000074596 -0.0000291725 -0.0000124091 -0.0000594436 0.0000287292 0.0001763534 -0.0000735864 0.0003270737 -0.0000362437 0.0000308608 0.0000103623 -0.0000152872 -0.0001125595 -0.0001608016 0.0004403488 -0.0002086210 -0.0000611233 0.0000256170 -0.0000790029 0.0001066771 -0.0000067589 -0.0000023601 -0.0000043211 0.0000533236 -0.0000413138 0.0000785897 0.0000373133 0.0000320425 -0.0000493468 0.0000122962 0.0000309379 0.0000147986 -0.0000007627 -0.0000036086 -0.0000060469 0.0000195001 0.0003101151 -0.0001371615 0.0000014635 -0.0000301449 0.0000128977 -0.0000030917 -0.0000006666 0.0000004353 0.0000101276 0.0000011123 -0.0000006226 0.0000008206 -0.0000002790 0.0000011251 0.0000002415 0.0000000192 -0.0000002488 0.0000029501 0.0000137760 -0.0000082130 0.0000004301 0.0000003626 0.0000006348 -0.0000381533 -0.0001626788 0.0000993541 -0.0000026534 -0.0000006722 -0.0000002281 -0.0000053530 -0.0000051459 0.0000006405 0.0000059054 0.0000046657 -0.0000022730 -0.0000067530 -0.0000014507 0.0000037040 -0.0000053840 -0.0000069273 0.0000008458 -0.0009671158 0.0002662400 0.0003433532 -0.0139684479 0.0223633441 0.0162397624 0.0012394238 -0.0019253659 -0.0014226376 -0.0000551140 -0.0001281901 -0.0000001906 -0.0010354826 -0.0001340445 0.0005801598 -0.0000883726 0.0001666402 0.0001093101 0.0020497943 0.0005199206 -0.0011607373 -0.0000109005 -0.0000352260 -0.0000061900 0.0123454665 0.0026658895 -0.0065267601 -0.0004650370 -0.0014317045 -0.0001913450 -0.0229575999 -0.0056714101 0.0131902227 0.0000479603 -0.0002012225 -0.0000936016 -0.0020744992 -0.0026094570 -0.0002903741 0.0265791571 0.0304595021 0.0018859814 -0.0023105624 0.0001290327 0.0009950866 -0.0180007889 0.0410482968 0.0133042666 0.0285434756 0.0472222977 -0.0048448493 0.0121582321 0.0017183880 -0.0053424814 -0.0198171687 -0.0366198585 0.0040932761 -0.0161174424 -0.0040638604 0.0060710384 -0.3185321528 -0.5442443120 0.0535546014 -0.1475686813 -0.0065208575 0.0666152332 0.2420160622 0.4177956360 -0.0555312180 0.1833578332 0.0064207010 -0.0751460905 0.2250332604 -0.4580598276 -0.1579528497 -0.0000214716 0.0000004718 0.0000047942 0.0003849349 0.0001150581 0.0000114372 0.0000023872 0.0000016219 -0.0000006008 0.0000465854 0.0000139164 0.0000979458 0.0002047807 -0.0001047444 -0.0000917245 -0.0000383787 -0.0000123778 0.0000075621 -0.0000031024 0.0000014943 -0.0000011438 0.0000041068 0.0000093004 0.0000066837 -0.0004011212 0.0005823236 0.0001396164 0.0000027750 0.0000016263 -0.0000036119 -0.0001266882 -0.0000025634 -0.0000345386 0.0000307650 0.0002720096 -0.0000989678 0.0000270011 -0.0000641059 -0.0000926987 -0.0000682626 -0.0000268180 -0.0000245371 -0.0000147272 -0.0000194929 0.0000321837 0.0044916761 -0.0061544754 0.0007500868 0.0020748569 0.0006417437 -0.0001657789 -0.0005040151 -0.0015561482 -0.0018008954 0.0000550211 -0.0000161315 0.0000576258 -0.0000869997 -0.0000202938 -0.0000084462 -0.0000017397 0.0000187737 -0.0000165369 -0.0006682194 -0.0026100002 0.0020344864 0.0002359220 0.0001490309 -0.0001712362 -0.0001412904 -0.0001467371 -0.0002799280 -0.0000436806 0.0000824905 0.0000620178 0.0000066407 0.0000392460 0.0000518226 -0.0000742703 -0.0000427981 -0.0000761474 0.0000053830 0.0000133399 -0.0000348777 0.0000126654 0.0002318719 0.0002817398 -0.0017304302 -0.0007342956 -0.0017635569 0.0001490907 -0.0005034944 -0.0004812201 0.0010048543 0.0005007072 0.0009150890 -0.0000349315 0.0001625528 0.0002353656 0.0010314495 -0.0031688338 -0.0032724941 0.0197206731 0.0081710576 0.0200207776 0.0000002493 0.0000100754 0.0000311035 0.0000057489 0.0000015830 -0.0000053438 -0.0000007043 -0.0000006187 -0.0000015730 0.0000036128 0.0000075681 0.0000268748 0.0000027783 0.0000002093 -0.0000043440 -0.0000200675 -0.0001248579 -0.0003473632 -0.0000672329 -0.0000197853 0.0000646590 0.0000141888 -0.0000044080 -0.0000154633 -0.0000530123 -0.0000905704 -0.0003165923 -0.0000514940 -0.0000143855 0.0000506505 0.0000031153 -0.0001247265 -0.0000798160 -0.0000776819 -0.0000736797 -0.0000411896 -0.0000018253 0.0000019896 0.0000087379 -0.0000110085 0.0000026009 0.0000056684 0.0000004158 0.0000007780 0.0000001658 0.0000004545 0.0000010591 -0.0000000968 0.0000004832 0.0000037673 -0.0000014741 -0.0000162829 -0.0000078267 0.0000056768 -0.0000012654 -0.0000566355 0.0000230161 0.0001900557 0.0000786867 -0.0000619637 -0.0000026075 -0.0000414042 0.0000156857 -0.0000020565 0.0000049053 -0.0000013808 0.0000211517 0.0004701117 -0.0001790366 0.0000526016 -0.0000396500 0.0000055142 -0.0000002534 -0.0000005514 0.0000005045 0.0000000087 -0.0000005192 0.0000003816 -0.0000032541 -0.0000148992 0.0000065458 0.0000182294 0.0000211107 0.0000127645 0.0000314595 0.0001737377 -0.0000886579 -0.0002129579 -0.0002455905 -0.0001487389 0.0000046477 0.0000223324 -0.0000111569 -0.0000038305 -0.0000011712 -0.0000048071 -0.0000500210 -0.0002549602 0.0001344407 0.0000294982 -0.0000119253 0.0000550812 0.0011398237 -0.0007358418 -0.0001326580 0.0001933516 0.0013824053 0.0020685430 -0.0135503697 0.0064837516 0.0018087617 -0.0007894675 0.0020300398 -0.0027801197 0.0000443881 0.0000725377 0.0000276802 -0.0001858819 0.0000874584 -0.0002507146 -0.0003449854 -0.0003922695 0.0002951968 -0.0000703849 -0.0005585295 -0.0004286227 0.0000019117 0.0000027705 -0.0000018526 0.0000066104 0.0001445748 -0.0000553356 -0.0000019379 -0.0000137383 0.0000055699 0.0000033591 0.0000003902 -0.0000015871 -0.0000179501 -0.0000068753 0.0000046608 -0.0000037731 0.0000071390 -0.0000130819 -0.0000000961 0.0000001832 0.0000017466 0.0000169751 0.0000913922 -0.0000532136 0.0000093693 0.0000022450 -0.0000014162 -0.0002328343 -0.0010733208 0.0006700809 0.0000196631 -0.0000190397 0.0000110008 0.0000193926 0.0000089299 0.0000127468 -0.0000229153 0.0000104558 -0.0000392061 0.0000051198 -0.0000080731 0.0000158689 0.0000542166 0.0000351771 0.0000551946 0.0021662722 0.0020348805 -0.0004227349 0.2705765824 -0.4330435834 -0.3143653140 -0.0241819551 0.0374178956 0.0276937042 0.0009811211 0.0030816279 0.0005518882 0.0199212426 0.0024390139 -0.0112025152 0.0049928668 0.0030053692 -0.0020881817 -0.0548070959 -0.0141442495 0.0308500327 0.0002587921 0.0008031227 0.0000561403 -0.2367888372 -0.0511130467 0.1252440338 -0.0267256158 -0.0507997177 -0.0006245465 0.6243641907 0.1515415092 -0.3579872921 -0.0005157976 -0.0005937567 0.0002188609 0.0057411903 0.0072409514 0.0005528813 -0.0643166852 -0.0805984941 -0.0066792384 0.0000420790 -0.0002106270 -0.0000368936 -0.0006559611 0.0016283216 0.0005035932 0.0011700848 0.0018586531 -0.0002151238 0.0009453048 0.0000777622 -0.0004242537 -0.0011249086 -0.0020234467 0.0002399430 -0.0015740513 -0.0001578914 0.0006275590 -0.0130021341 -0.0219242663 0.0022915426 -0.0113958151 -0.0005166922 0.0051284207 0.0134692218 0.0232613062 -0.0030794173 0.0176761720 0.0004252057 -0.0072764284 0.0086788749 -0.0178254725 -0.0061040546 -0.0002450629 -0.0001042538 0.0000312892 0.0018086171 -0.0011537719 -0.0004586329 -0.0000695820 -0.0000266830 0.0000435150 -0.0000296009 -0.0000951220 -0.0001832941 0.0000043478 0.0001077388 0.0000261290 -0.0000255188 -0.0000210966 0.0000038604 -0.0000005104 0.0000008487 -0.0000057355 0.0000030842 -0.0000139107 -0.0000124968 -0.0000311886 0.0000424244 0.0000083966 -0.0000026115 0.0000039838 -0.0000025361 0.0000152378 -0.0000105369 -0.0000134250 -0.0000620051 0.0000211007 0.0000048328 -0.0000713431 0.0001460840 0.0001200578 0.0000578801 0.0000389861 0.0000277515 -0.0000175075 -0.0000155643 0.0000283038 0.0003410311 -0.0004995148 0.0000623583 0.0001846522 0.0000581126 -0.0000038789 -0.0000573393 -0.0001031412 -0.0000802740 0.0000412914 -0.0000521045 0.0000064878 0.0000064088 0.0000029736 -0.0000015563 -0.0000134791 -0.0000164981 0.0000511195 -0.0000491730 -0.0001342229 0.0000702564 0.0005877467 -0.0000142040 -0.0002604484 0.0001611151 -0.0000349516 0.0001595973 -0.0000077628 0.0000113168 0.0000085550 0.0000064969 -0.0000042606 -0.0000038988 -0.0000174946 -0.0000069411 -0.0000157883 0.0000013367 -0.0000002641 -0.0000014316 -0.0000015619 0.0000361429 0.0000418668 -0.0002142860 -0.0000927001 -0.0002203642 -0.0000255371 0.0000222900 0.0000639603 0.0002024117 0.0000963192 0.0001943500 -0.0000111246 0.0000078005 0.0000106853 0.0001534695 -0.0004771143 -0.0004845573 0.0024596714 0.0010226696 0.0025061412 -0.0001219831 -0.0006549185 -0.0018687033 -0.0001195183 -0.0000022277 0.0001998297 -0.0000252784 -0.0000144308 0.0000306276 -0.0000625098 -0.0001721492 -0.0006329103 -0.0001843933 -0.0000420931 0.0001874444 0.0014287499 0.0075084720 0.0210934825 0.0021796538 0.0004983625 -0.0019577732 -0.0001369575 0.0001046365 0.0002772145 0.0012055247 0.0021099064 0.0073581431 0.0023891661 0.0006952173 -0.0021981864 0.0000022796 -0.0000061330 -0.0000043428 0.0000010716 -0.0000013007 -0.0000008657 -0.0000044733 -0.0000213748 -0.0001742155 0.0001248352 -0.0000439004 -0.0000819390 0.0000011537 0.0000008445 -0.0000002243 -0.0000010028 -0.0000008439 0.0000011310 -0.0000010580 -0.0000103130 0.0000042291 0.0000008320 0.0000008751 -0.0000005524 0.0000034775 0.0001118648 -0.0000412216 -0.0000025621 -0.0000013175 0.0000045169 -0.0000025500 -0.0000305270 0.0000115927 0.0000145513 -0.0000071496 0.0000000483 0.0000187451 0.0003530122 -0.0001333148 -0.0001371022 0.0000939037 -0.0000066863 -0.0000009758 -0.0000012879 0.0000003662 -0.0000005906 -0.0000020962 0.0000001153 -0.0000013262 -0.0000123509 0.0000072601 -0.0000103000 -0.0000121742 -0.0000070879 0.0000199898 0.0001401301 -0.0000755539 0.0001019479 0.0001191477 0.0000728341 0.0000056099 0.0000243878 -0.0000117451 -0.0000149630 0.0000048291 -0.0000271924 -0.0000507736 -0.0002730154 0.0001492613 0.0001559307 -0.0000678960 0.0002974150 0.0004163904 -0.0012573598 -0.0015728160 0.0013139725 0.0130256389 0.0172537742 -0.0073211453 0.0037431039 0.0009830361 0.0004622363 -0.0014933345 0.0020212562 -0.0002278219 -0.0005430369 -0.0002854030 0.0007726018 -0.0002166385 0.0012910262 0.0014217368 0.0019255947 -0.0012433193 0.0001728657 0.0050756441 0.0036487518 0.0000000620 0.0000013879 0.0000000382 -0.0000034847 -0.0000219989 0.0000071155 -0.0000008483 0.0000004813 0.0000001044 0.0000145614 0.0000001440 0.0000009245 -0.0000010931 -0.0000048858 -0.0000000247 0.0001094585 0.0001392430 0.0000731833 -0.0000726008 -0.0000195350 -0.0000594864 0.0005331918 0.0027839473 -0.0015839888 0.0001653900 -0.0000583835 -0.0001175275 -0.0069391170 -0.0315551558 0.0191853674 -0.0000043424 0.0000232753 0.0000150076 -0.0000030237 0.0000051816 0.0000094526 0.0000248129 -0.0000124655 -0.0000260610 -0.0000165350 -0.0000030369 0.0000500935 -0.0000077399 0.0000010575 0.0000152163 -0.0001221126 -0.0001727163 -0.0000187324 -0.0058479608 0.0093604861 0.0068305013 0.0005181308 -0.0008005237 -0.0005965595 -0.0000122043 -0.0000791506 -0.0000244382 -0.0004990410 -0.0000692240 0.0002758136 -0.0000585839 0.0000714747 0.0000572019 0.0012888512 0.0003200689 -0.0007308437 -0.0000137744 -0.0000337659 -0.0000002095 0.0058721591 0.0012519975 -0.0030933359 -0.0000303342 -0.0003564180 -0.0000291718 -0.0146302780 -0.0035626477 0.0083902172 -0.0000008282 0.0000265996 0.0000129722 -0.0001779627 -0.0002334781 -0.0000519837 0.0021902289 0.0026755815 0.0002429314 -0.0000033548 0.0000086896 0.0000065668 0.0000032145 -0.0000188907 -0.0000040076 -0.0000049451 -0.0000058317 0.0000009451 -0.0000168119 -0.0000021538 0.0000078428 0.0000360989 0.0000621152 -0.0000078968 0.0000586649 0.0000019586 -0.0000240609 0.0000599512 0.0000886734 -0.0000142082 0.0001980013 0.0000125602 -0.0000985621 -0.0004128749 -0.0007036285 0.0000915320 -0.0006577858 -0.0000101233 0.0002703371 -0.0000862431 0.0001857445 0.0000608552 0.0000291613 0.0000144189 0.0000011775 -0.0003698372 -0.0000074721 -0.0000054056 -0.0030047748 -0.0010886622 0.0019249799 0.0000140791 0.0000222904 0.0000409160 -0.0000262060 -0.0000408246 -0.0000193607 0.0000319318 0.0000146768 0.0000059951 -0.0000214291 0.0000109413 -0.0000158768 0.0001064718 -0.0003750548 -0.0005397333 -0.0000196791 0.0000235662 0.0000206449 0.0000017683 -0.0000071760 0.0000054991 -0.0000003028 0.0000044881 0.0000042540 -0.0000463776 -0.0000123988 0.0000084224 -0.0012231983 0.0048265702 0.0054321220 0.0004736378 0.0001405443 0.0001806680 -0.0003072682 -0.0004495664 0.0010465275 0.0001764854 -0.0002695285 0.0000496914 0.0001897535 0.0000727959 -0.0000437676 -0.0000550277 -0.0001616338 -0.0002022849 0.0000907174 -0.0001444923 -0.0000257851 0.0000175067 0.0000274165 0.0000145255 0.0000050859 0.0000369958 -0.0000222096 0.0000158240 0.0001464850 -0.0001173862 0.0003823872 -0.0000036452 -0.0001498439 0.0001297536 -0.0000003559 0.0001612489 -0.0000018637 0.0000026101 0.0000020137 0.0000023685 -0.0000025503 -0.0000013678 -0.0000083716 -0.0000029236 -0.0000069240 0.0000001745 -0.0000001885 -0.0000002083 -0.0000013086 0.0000116871 0.0000137189 -0.0000551530 -0.0000239125 -0.0000560658 -0.0000084042 0.0000174053 0.0000141624 0.0000841503 0.0000328534 0.0000744311 -0.0000019622 -0.0000006666 -0.0000031789 0.0000519712 -0.0001437295 -0.0001523562 0.0006350371 0.0002670382 0.0006427252 -0.0051487558 -0.0283721853 -0.0812227710 -0.0077442359 -0.0006505795 0.0106666631 -0.0002760856 -0.0001368878 0.0000182072 0.0001391330 -0.0003046033 -0.0011861953 0.0003609848 0.0002653853 0.0002172883 0.0631975522 0.3276849297 0.9222973318 0.1245364190 0.0279323284 -0.1086983676 -0.0000478971 0.0000467819 0.0001940367 0.0011638443 0.0045343974 0.0140428082 -0.0025931446 -0.0008488804 0.0011417995 0.0000000338 0.0000003592 0.0000014152 0.0000014152 0.0000004088 0.0000014088 -0.0000058423 -0.0000201480 -0.0000493355 -0.0000370256 -0.0000540940 -0.0001465714 0.0000024487 -0.0000013452 -0.0000002306 0.0000016435 0.0000026510 0.0000003320 0.0000019984 -0.0000142643 0.0000053185 -0.0000555985 -0.0000247463 0.0000188177 0.0000026593 0.0001420132 -0.0000592462 0.0006118064 0.0002639323 -0.0002066556 0.0000002095 0.0000147193 -0.0000044757 -0.0000340677 0.0000249312 -0.0000028845 0.0000108438 -0.0001614850 0.0000395278 0.0003805212 -0.0002574687 0.0000263088 0.0000229836 -0.0000341078 0.0000543113 -0.0000335309 -0.0000387787 0.0000124800 -0.0000328241 -0.0000710352 -0.0000038805 0.0002316741 0.0002473935 0.0001792276 0.0001480902 0.0007354855 -0.0003630544 -0.0025589630 -0.0029474731 -0.0017893721 0.0000146581 0.0002003583 -0.0001335691 0.0000555415 -0.0000200021 0.0001004196 -0.0003677164 -0.0022779652 0.0013202864 -0.0005485962 0.0002819515 -0.0010891975 -0.0000080984 0.0000232298 0.0000133996 -0.0000088216 -0.0002091631 -0.0002568418 0.0001634609 -0.0000706101 -0.0000116601 -0.0000115280 -0.0000431424 0.0000562023 -0.0000364309 -0.0001778828 0.0000465938 -0.0011427542 0.0002888528 -0.0010268812 0.0006815414 0.0009408191 -0.0007626565 0.0004397350 0.0010293976 0.0010026182 0.0000154927 -0.0001049993 0.0000426623 -0.0000504758 -0.0124745951 0.0047519249 0.0001843669 0.0011621971 -0.0004732779 -0.0000692314 0.0001583866 -0.0000640566 -0.0000618691 -0.0000283905 0.0000202748 -0.0000353537 -0.0000404399 -0.0000310994 0.0000790371 0.0000011042 -0.0000243023 0.0000258129 0.0000908484 -0.0000491966 -0.0000119365 0.0000012882 -0.0000085121 -0.0002510584 -0.0008148229 0.0004087641 0.0000240015 -0.0000033996 0.0000181325 0.0000198361 0.0000063490 -0.0000014254 -0.0000209944 0.0000007893 -0.0000045744 0.0000150103 0.0000026022 -0.0000035213 0.0000100513 -0.0000012108 0.0000102429 0.0000018696 0.0000398426 -0.0000101267 -0.0002033614 0.0003300250 0.0002235545 0.0000171088 -0.0000317195 -0.0000204262 -0.0000011620 -0.0000003515 0.0000007177 0.0000397019 0.0000107143 -0.0000187895 0.0000042033 0.0000112891 0.0000017696 -0.0000115737 -0.0000027907 0.0000069982 -0.0000017682 0.0000018866 -0.0000000049 -0.0004413938 -0.0000994808 0.0002071803 -0.0000607911 -0.0001388024 -0.0000172256 0.0001353613 0.0000355156 -0.0000836478 -0.0000017568 -0.0000038612 0.0000011121 0.0000024638 0.0000051923 -0.0000025420 -0.0000315554 -0.0000360818 -0.0000002315 0.0000043667 -0.0000050632 -0.0000019941 0.0000648143 -0.0000928162 -0.0000400310 -0.0000670017 -0.0001230045 0.0000096817 0.0001284543 0.0000190193 -0.0000559054 -0.0001458575 -0.0002360084 0.0000348687 -0.0001301351 0.0000096536 0.0000562291 0.0007742472 0.0013353708 -0.0001286748 -0.0015246389 -0.0000728729 0.0006812900 0.0015749738 0.0027014624 -0.0003624908 0.0014761438 0.0000051748 -0.0006130176 -0.0005763041 0.0011175280 0.0003982938 0.0000416542 0.0000024225 0.0000003753 -0.0006721726 -0.0000228236 -0.0000167272 -0.0000093843 -0.0000052176 -0.0000057581 0.0000000969 0.0000016582 0.0000019899 -0.0000091624 -0.0000064058 0.0000001828 0.0000091043 0.0000036821 0.0000001297 -0.0000059410 0.0000019560 0.0000015909 0.0000006355 -0.0000182853 -0.0000234999 0.0000014887 0.0000229193 0.0000072117 -0.0000048598 0.0000028144 -0.0000052485 0.0000033345 -0.0000010312 -0.0000020995 -0.0000185088 0.0000040828 0.0000003910 -0.0000666719 0.0001460966 0.0002348962 0.0000988719 0.0000535675 0.0000487893 -0.0000110230 -0.0000132151 0.0000090998 0.0001365559 -0.0001969215 0.0000252919 -0.0000742138 0.0000081052 0.0000154086 -0.0000538370 -0.0000945576 -0.0001286212 0.0000652915 -0.0000751509 0.0000192617 0.0000250748 0.0000220622 0.0000103151 -0.0000104416 -0.0000114487 0.0000264699 -0.0000111783 -0.0000343293 0.0000223414 0.0001689634 -0.0000071277 -0.0000669350 0.0000473100 -0.0000082176 0.0000583288 -0.0000118289 0.0000242678 -0.0000127148 0.0000001688 0.0000340976 0.0000420753 -0.0000019301 0.0000032824 0.0000040481 0.0000103587 -0.0000051442 -0.0000010593 -0.0000058420 -0.0000106052 -0.0000133001 0.0000913749 0.0000250193 0.0000852626 0.0001363152 -0.0004543196 -0.0004671805 0.0000053675 0.0000027554 -0.0000076734 -0.0000148399 0.0000063092 0.0000019045 -0.0000295792 0.0001300207 0.0001275320 -0.0009194247 -0.0003498741 -0.0009410970 0.0000007381 -0.0000235108 -0.0000756440 -0.0000001486 -0.0000002255 -0.0000007364 0.0000065159 0.0000044555 0.0000033567 -0.0000039258 -0.0000039921 -0.0000074275 0.0000143867 0.0000066467 -0.0000058507 0.0000383110 0.0003035798 0.0008731366 0.0000145773 0.0000011946 -0.0000145563 -0.0000119074 -0.0000074246 -0.0000066875 0.0000109727 0.0000280284 0.0000733292 -0.0001335113 -0.0000555573 0.0000909173 0.0000045463 -0.0000041087 -0.0000025962 0.0000049861 -0.0000009431 0.0000020072 0.0000032084 0.0000038812 0.0000043121 0.0000052691 0.0000017568 -0.0000002752 -0.0013487201 -0.0005810986 0.0004521512 0.0008956078 -0.0006436473 0.0000506462 -0.0027105117 0.0273185962 -0.0103842904 0.0623553598 0.0254899281 -0.0202799555 -0.0072678443 -0.2860023544 0.1149130774 -0.6852882092 -0.2951366828 0.2292846033 0.0001510325 0.0327246363 -0.0120921270 0.0223616425 -0.0192019866 0.0030918532 -0.0150555724 -0.3800472858 0.1450226577 -0.2692788394 0.1843677868 -0.0196339842 0.0001036148 -0.0000280822 -0.0001356679 0.0000961341 -0.0000847430 0.0002032977 0.0005268423 0.0021174262 -0.0009557946 -0.0027770799 -0.0035690701 -0.0016740787 -0.0046100044 -0.0245856966 0.0123318297 0.0316482705 0.0367382342 0.0218580126 0.0009548842 0.0035717516 -0.0014823807 -0.0040925129 0.0016390036 -0.0076289404 -0.0075360247 -0.0366823781 0.0189326233 0.0446340834 -0.0189859476 0.0843094466 -0.0000072458 0.0000053652 0.0000034581 -0.0000068026 -0.0000252297 -0.0000341714 0.0000990643 -0.0000507655 -0.0000157770 -0.0000031470 -0.0000032860 0.0000015984 0.0000047006 0.0000152810 -0.0000113575 0.0000598776 -0.0000401258 0.0000915311 -0.0001160623 -0.0001109107 0.0000817158 -0.0000079595 -0.0000381778 -0.0000380159 -0.0000010971 -0.0000002094 -0.0000011105 -0.0000020497 0.0000261862 -0.0000127867 0.0000004631 -0.0000041079 0.0000012806 -0.0000008640 0.0000009549 0.0000009150 0.0000017150 0.0000019496 -0.0000001957 -0.0000008239 0.0000005556 -0.0000021901 -0.0000011338 -0.0000024449 0.0000005267 -0.0000105263 -0.0000532063 0.0000355305 0.0000013762 0.0000035802 -0.0000011421 0.0001633618 0.0005962824 -0.0003381072 0.0000008608 -0.0000002718 0.0000017304 -0.0000025140 -0.0000021955 0.0000007986 0.0000010234 0.0000009396 -0.0000019180 -0.0000024513 0.0000024435 0.0000040244 0.0000002980 -0.0000007608 0.0000020848 0.0003902488 0.0031421732 0.0007689699 -0.0023093966 0.0036613429 0.0026604785 0.0002273513 -0.0003120725 -0.0002458911 -0.0000860556 -0.0000473653 0.0000330324 -0.0002199542 -0.0000285607 0.0001247161 -0.0002736651 -0.0004679219 0.0000133366 0.0010459408 0.0002670236 -0.0005903656 -0.0000013074 -0.0000008827 -0.0000004732 0.0026077741 0.0005594992 -0.0013849861 0.0026293066 0.0056691894 0.0002883910 -0.0120724114 -0.0028738419 0.0068800078 -0.0002818562 -0.0003324631 0.0001012091 0.0020418960 0.0020048562 -0.0000436052 -0.0206731715 -0.0227113834 -0.0012560142 0.0013967894 -0.0011382923 -0.0007468696 0.0136399510 -0.0189501293 -0.0083886873 -0.0204233511 -0.0368300928 0.0030022796 0.0281700059 0.0039443364 -0.0124127225 -0.0295469197 -0.0472370586 0.0070662613 -0.0326959190 0.0024228855 0.0140470791 0.2352482142 0.4051454599 -0.0391377984 -0.3319174353 -0.0163301791 0.1497258051 0.3186006036 0.5428011255 -0.0740170664 0.3675413308 0.0017415888 -0.1526502043 -0.1196256864 0.2323985159 0.0821704554 0.0000246440 0.0000102559 0.0000051744 -0.0003422438 -0.0000268335 -0.0000174308 -0.0000025261 -0.0000029071 0.0000007077 -0.0000398569 -0.0000033739 -0.0000734526 -0.0000634837 0.0000964102 0.0000387865 0.0000011699 -0.0000157510 0.0000143639 -0.0000139980 -0.0000032438 -0.0000071240 0.0000029402 0.0000131662 0.0000133411 -0.0005770236 0.0009965952 0.0002494903 -0.0000027375 0.0000103488 -0.0000008543 0.0000700300 0.0000188518 0.0000251465 -0.0005672073 -0.0001696018 0.0001542802 0.0000239215 -0.0000892122 -0.0001438953 -0.0000340766 -0.0000233718 -0.0000165995 -0.0000122439 -0.0000000933 0.0000049000 0.0073602917 -0.0100589485 0.0013842388 0.0030577861 0.0008733477 -0.0001568730 -0.0008481104 -0.0028923190 -0.0032080666 0.0001433630 -0.0001021034 0.0000679979 -0.0000737385 0.0000016155 -0.0000093036 -0.0000016888 0.0000110705 -0.0000390713 0.0002799395 0.0015303552 -0.0011322459 0.0049019485 -0.0000973324 -0.0022235955 0.0014587346 0.0000894757 0.0014594203 -0.0000062666 0.0000063687 0.0000000217 0.0000016552 0.0000430483 0.0000546315 -0.0001604474 -0.0000738397 -0.0001476054 0.0000133434 0.0000128424 -0.0000369826 0.0000230753 -0.0000241887 -0.0000206429 -0.0001525709 -0.0000646696 -0.0001513949 0.0001982867 -0.0006229358 -0.0005757279 0.0019138534 0.0008923129 0.0017059507 -0.0000523737 0.0001968256 0.0002879011 -0.0001559315 0.0002234729 0.0001828693 0.0016914297 0.0006938610 0.0017063880 -0.0000008523 -0.0000113882 -0.0000368788 -0.0000153431 -0.0000032433 0.0000140503 0.0000015106 0.0000009870 -0.0000011099 0.0000007675 0.0000029344 0.0000103835 -0.0000054761 -0.0000004859 0.0000063499 0.0000317141 0.0001443451 0.0004201608 0.0001857390 0.0000393437 -0.0001582176 -0.0000026213 -0.0000035213 -0.0000050881 -0.0000155934 -0.0000318944 -0.0001113208 0.0000675578 0.0000114832 -0.0000644840 0.0000033513 -0.0001493569 -0.0000939196 -0.0000871016 -0.0000748784 -0.0000559091 0.0000013288 0.0000006514 0.0000038589 0.0000005724 0.0000006141 0.0000007587 -0.0000001695 0.0000014365 -0.0000001009 0.0000037810 -0.0000010907 0.0000049617 -0.0000026618 0.0000102191 -0.0000039856 0.0000306776 0.0000111562 -0.0000097858 -0.0000040243 -0.0001117574 0.0000439448 -0.0003328880 -0.0001441381 0.0001099470 -0.0000007046 0.0000510724 -0.0000153115 0.0000111306 -0.0000086354 0.0000015590 -0.0000125778 -0.0005851091 0.0002044723 -0.0001296160 0.0000905687 -0.0000107160 0.0000095958 0.0000156174 0.0000044664 -0.0000306281 0.0000088162 -0.0000554876 -0.0001567978 -0.0006650319 0.0002552107 0.0009907127 0.0012389236 0.0006136597 0.0014106547 0.0078135085 -0.0038152605 -0.0111581385 -0.0129348655 -0.0077207472 -0.0003225919 -0.0011745856 0.0004780482 0.0013544773 -0.0005343212 0.0025203167 0.0024799761 0.0120760043 -0.0062356844 -0.0147390052 0.0062850075 -0.0278529190 -0.0007281954 0.0004855149 0.0001531129 -0.0001797343 -0.0013063030 -0.0018900111 0.0088054380 -0.0043023331 -0.0010796277 0.0004194573 -0.0010909318 0.0014552635 -0.0000563340 -0.0000889359 0.0000107010 0.0000146557 -0.0000253713 0.0000656918 0.0005482189 0.0007332043 -0.0005473209 0.0000892347 0.0004418395 0.0003655124 0.0000037324 0.0000164937 -0.0000024617 0.0000581874 0.0023694961 -0.0009152011 -0.0000328650 -0.0002047877 0.0000861637 -0.0000011520 -0.0000418479 -0.0000173168 0.0000559377 -0.0000091537 -0.0000091683 0.0000333921 -0.0000234411 0.0000685554 0.0000258840 0.0000926918 -0.0000146079 0.0002493356 0.0012571556 -0.0008381884 -0.0000374507 -0.0000875625 0.0000212590 -0.0038543763 -0.0141019705 0.0079507258 -0.0000420334 0.0000134776 -0.0000360749 -0.0000321644 -0.0000045234 0.0000006693 0.0000326296 -0.0000031848 0.0000067857 -0.0000252704 -0.0000023884 0.0000078062 -0.0000153657 0.0000032625 -0.0000143961 -0.0000151213 0.0000370216 0.0000425781 0.0000493025 -0.0000791856 -0.0000431385 0.0000000534 0.0000144566 0.0000036009 -0.0000007795 -0.0000030829 -0.0000014747 -0.0000927131 -0.0000224989 0.0000466312 -0.0000253214 -0.0000448121 -0.0000007840 0.0000768377 0.0000189932 -0.0000441351 0.0000028648 -0.0000015753 0.0000000196 0.0010540590 0.0002423295 -0.0005257206 0.0002601696 0.0005494119 0.0000395326 -0.0008892327 -0.0002147610 0.0005126367 -0.0000118566 -0.0000056550 0.0000062089 0.0000718969 0.0000610551 -0.0000081182 -0.0006602263 -0.0007031260 -0.0000327848 0.0000595174 -0.0000438439 -0.0000308753 0.0005243392 -0.0007031383 -0.0003188358 -0.0008589115 -0.0015524379 0.0001254990 0.0011146616 0.0001570285 -0.0004913426 -0.0011856718 -0.0018989991 0.0002830796 -0.0014037617 0.0000967659 0.0006021468 0.0099096887 0.0170622191 -0.0016477491 -0.0131296637 -0.0006418669 0.0059283283 0.0128178117 0.0218239201 -0.0029781776 0.0157507983 0.0000820892 -0.0065410142 -0.0045069471 0.0087260696 0.0030914363 -0.0000630492 -0.0000039972 0.0000009604 0.0010110745 0.0000378229 0.0000045612 0.0000257520 0.0000397263 -0.0000013941 -0.0000008079 0.0000005923 0.0000011892 0.0000080175 0.0000018424 -0.0000060647 -0.0000066446 -0.0000016465 0.0000028959 0.0000056502 -0.0000023993 -0.0000067581 0.0000009562 0.0000505030 0.0000670686 -0.0000394931 0.0000214015 0.0000086912 0.0000018036 0.0000116988 -0.0000059971 -0.0000039064 0.0000039369 0.0000069882 0.0000023423 -0.0000015290 -0.0000168588 0.0001851939 -0.0004685750 -0.0007210483 -0.0001645003 -0.0000880066 -0.0001296672 -0.0000443038 -0.0000340385 0.0000286147 0.0002053544 -0.0002733415 0.0000437286 0.0003449295 0.0000536091 -0.0000471216 0.0000262103 -0.0000485782 -0.0000139961 0.0000315799 -0.0000273125 0.0000108703 -0.0000359505 -0.0000228446 -0.0000295829 -0.0000447436 -0.0000621357 0.0001402478 -0.0000072591 -0.0000488166 0.0000519622 -0.0001019256 0.0000067583 0.0000257814 0.0000922248 0.0000112196 0.0000823836 0.0000153696 -0.0000087362 0.0000028811 0.0000011029 -0.0000271519 -0.0000309559 0.0000055678 -0.0000008596 0.0000022667 -0.0000100950 0.0000045174 -0.0000015401 0.0000042931 -0.0000007917 0.0000013502 0.0000082187 0.0000123942 0.0000160029 -0.0000885340 0.0003240414 0.0003407242 -0.0000394480 -0.0000155972 -0.0000365630 0.0000159820 0.0000013252 0.0000090988 -0.0000186853 0.0000126943 0.0000119290 -0.0001733222 -0.0001039975 -0.0001987289 -0.0000221894 -0.0000592609 -0.0001255708 -0.0000246271 -0.0000018133 0.0000413263 -0.0000187585 -0.0000105480 -0.0000062781 0.0000089364 -0.0000047893 -0.0000292359 -0.0000101063 -0.0000123791 -0.0000160250 0.0001069686 0.0005305758 0.0013695801 0.0003803572 0.0000848464 -0.0003510619 0.0000245687 0.0000141855 0.0000086326 0.0000108075 0.0000977177 0.0002975698 -0.0000844407 0.0000119504 0.0001163467 -0.0000056590 -0.0000018567 0.0000003562 -0.0000102672 -0.0000026387 -0.0000036823 -0.0000060791 -0.0000061213 -0.0000072021 -0.0000115599 -0.0000034684 0.0000012811 0.0001492420 0.0000336108 -0.0000469431 -0.0001471190 0.0000827116 -0.0001301942 0.0003625898 -0.0033366758 0.0012712014 -0.0076480953 -0.0031119556 0.0024872878 0.0008940720 0.0350131883 -0.0140721475 0.0839682874 0.0362069013 -0.0281130119 0.0000515984 -0.0038697010 0.0013421641 -0.0031186883 0.0025345015 -0.0003885278 0.0016693712 0.0451515878 -0.0170062925 0.0367804196 -0.0250900433 0.0026377448 -0.0002562211 -0.0003963566 -0.0001014278 0.0007449464 -0.0002024288 0.0013420721 0.0038133515 0.0161726981 -0.0061828941 -0.0242070602 -0.0302431880 -0.0150139788 -0.0342567641 -0.1899796463 0.0927264630 0.2726465669 0.3160193895 0.1886242503 0.0078235424 0.0284694963 -0.0115837073 -0.0328424873 0.0129678664 -0.0611236906 -0.0600956376 -0.2926829460 0.1511271459 0.3574523310 -0.1524260577 0.6754474333 -0.0000204194 0.0000141784 0.0000002173 0.0000001181 -0.0000268825 -0.0000396391 0.0002290208 -0.0001063183 -0.0000278371 0.0000261289 -0.0000621401 0.0000728855 -0.0000146061 -0.0000292301 0.0000120199 -0.0000525783 0.0000290973 -0.0000946527 0.0002217483 0.0002040651 -0.0001686913 0.0000359818 0.0001160270 0.0000972156 -0.0000005391 -0.0000027839 0.0000010523 0.0000009477 -0.0000495485 0.0000185002 0.0000010464 0.0000060445 -0.0000020636 -0.0000025722 0.0000018353 -0.0000004640 0.0000096164 0.0000037260 -0.0000024809 0.0000037965 -0.0000014232 0.0000057990 -0.0000013412 -0.0000011681 -0.0000010954 -0.0000014139 -0.0000057351 0.0000047253 -0.0000000916 0.0000009833 -0.0000014368 0.0000209001 0.0000677550 -0.0000396750 -0.0000074708 0.0000034667 -0.0000027434 -0.0000095583 -0.0000021737 0.0000023811 0.0000087446 -0.0000006118 -0.0000019837 -0.0000095975 -0.0000003237 0.0000032133 -0.0000061653 -0.0000024304 -0.0000003384 0.0008873284 -0.0020662809 -0.0006259594 -0.0002585017 0.0003053419 0.0002519435 0.0000594454 0.0000085597 -0.0000329004 0.0000652480 -0.0000021218 -0.0000704393 -0.0006941637 -0.0001510420 0.0003688049 -0.0002722901 -0.0005666960 -0.0000196674 0.0005806332 0.0001816961 -0.0003082672 0.0000151569 -0.0000406836 -0.0000163671 0.0078096008 0.0017574870 -0.0041063904 0.0030318370 0.0067423795 0.0003906375 -0.0073009235 -0.0016971860 0.0041187733 0.0000073747 0.0004283381 0.0001147469 0.0034377454 0.0044559968 0.0005530768 -0.0436055364 -0.0532293687 -0.0041143984 0.0023767974 0.0009223731 -0.0008685432 -0.0191775066 0.0425898337 0.0140158852 -0.0155139739 -0.0312723412 0.0017899823 -0.0332440275 -0.0021901997 0.0149945160 0.0109920785 0.0126655117 -0.0032603966 -0.0497131362 -0.0012163949 0.0205474719 0.1891438220 0.3297738735 -0.0307748866 0.3849431496 0.0161828115 -0.1741557529 -0.0949261354 -0.1560509162 0.0228120044 0.5420970003 0.0076862438 -0.2243155032 0.2244209673 -0.4572244739 -0.1574564197 -0.0000295657 -0.0000035087 -0.0000039930 0.0004728267 0.0000635723 -0.0000075051 0.0000007411 -0.0000001913 0.0000003166 -0.0000341754 -0.0000512884 -0.0001445119 -0.0001744130 0.0001340028 0.0001498589 -0.0000116370 -0.0000075121 -0.0000391612 0.0000397136 -0.0000002029 0.0000201749 -0.0000125909 0.0000055831 0.0000202018 0.0004866747 -0.0008884519 -0.0001842797 0.0000083060 -0.0000342256 0.0000199846 0.0001352543 -0.0000429760 -0.0000373640 -0.0006759360 0.0000697295 0.0000456284 0.0000726406 -0.0001547197 -0.0001982913 -0.0000894952 -0.0000154122 -0.0000215200 0.0000733272 0.0001000207 -0.0001103583 -0.0065756079 0.0092544988 -0.0014159360 -0.0028555391 -0.0006919818 0.0000856711 0.0005936604 0.0021947938 0.0022695393 -0.0002401482 0.0002640819 0.0000097416 -0.0000075858 -0.0000282738 -0.0000179617 0.0000395874 0.0001550183 -0.0003088917 -0.0001207995 -0.0005476568 0.0007917253 0.0060388360 -0.0000303787 -0.0027700014 0.0018498456 0.0000461740 0.0017849344 0.0000065578 -0.0000036715 0.0000022087 0.0000029263 -0.0000689486 -0.0000775575 0.0002146304 0.0000968958 0.0002010566 -0.0000101654 -0.0000044180 -0.0000056769 -0.0000170057 0.0000278715 0.0000298243 0.0000730028 0.0000317017 0.0000746757 -0.0002649861 0.0008979424 0.0008123850 -0.0024873593 -0.0011354917 -0.0022588617 0.0000637805 -0.0000565815 -0.0000721405 0.0001493141 -0.0002632718 -0.0002716433 -0.0008116525 -0.0003243976 -0.0008242466 -0.0000006143 -0.0000048959 -0.0000176168 -0.0000244711 -0.0000047755 0.0000223712 -0.0000006998 -0.0000005358 -0.0000019752 -0.0000005071 -0.0000026724 -0.0000095838 -0.0000104454 -0.0000021112 0.0000095756 0.0000211046 0.0000640767 0.0002081392 0.0002909343 0.0000476062 -0.0002339277 0.0000016371 -0.0000049135 -0.0000037014 0.0000161918 0.0000259203 0.0001141601 0.0001253751 0.0000266279 -0.0001068032 -0.0000126312 0.0000376541 0.0000292146 -0.0000187092 -0.0000166837 0.0000253795 0.0000004652 0.0000017945 0.0000029200 -0.0000018666 0.0000024989 0.0000007440 -0.0000010843 -0.0000017482 0.0000005199 0.0000078348 -0.0000033460 -0.0000003682 0.0000010647 0.0000060805 -0.0000026787 -0.0000065354 -0.0000071290 0.0000036660 -0.0000013966 -0.0000677852 0.0000257953 0.0000653938 0.0000357193 -0.0000255532 0.0000137543 0.0002016694 -0.0000763869 -0.0000825678 0.0000429462 -0.0000012052 -0.0000970995 -0.0022778004 0.0008642670 0.0008157435 -0.0005328154 0.0000504048 0.0000017193 0.0000010875 0.0000005631 -0.0000008620 0.0000004459 -0.0000022340 -0.0000055162 -0.0000227932 0.0000080380 0.0000308108 0.0000388720 0.0000189228 0.0000521213 0.0002717198 -0.0001292789 -0.0003475642 -0.0004031583 -0.0002407374 -0.0000127631 -0.0000476714 0.0000203830 0.0000458959 -0.0000174647 0.0000851077 0.0001043618 0.0004985613 -0.0002558595 -0.0004988808 0.0002141546 -0.0009439815 -0.0005558991 0.0002669585 -0.0000089214 -0.0000733689 0.0000655213 -0.0001160162 0.0064366965 -0.0031352876 -0.0007827493 0.0003531711 -0.0008060327 0.0011713649 -0.0000257252 -0.0000719876 0.0000154832 -0.0001199891 0.0000815909 -0.0001643727 0.0004142555 0.0004060693 -0.0003003329 0.0000687075 0.0003873445 0.0003388333 0.0000042854 0.0000019643 -0.0000016289 0.0000150782 0.0001505533 -0.0000567028 -0.0000023520 -0.0000116815 0.0000051464 0.0000069283 -0.0000011522 -0.0000010246 -0.0000334262 -0.0000126864 0.0000081014 -0.0000136401 0.0000031728 -0.0000271980 0.0000037153 0.0000011266 0.0000052793 0.0000044698 0.0000218599 -0.0000146324 0.0000004801 -0.0000020190 0.0000086509 -0.0000624111 -0.0002548889 0.0001578380 0.0000273788 -0.0000157032 0.0000263674 0.0000317121 0.0000279664 0.0000344126 -0.0000268200 0.0000007922 -0.0000904239 -0.0000178082 -0.0000003680 0.0000388100 0.0001333255 0.0001076115 0.0001244040 -0.0000584066 0.0000151463 -0.0000891197 -0.1256320665 0.2098399637 0.1488606714 0.0083819194 -0.0219139513 -0.0126606208 -0.0004871388 -0.0008182179 0.0001047216 0.0678262871 0.0159421970 -0.0356048064 0.0113225647 0.0284290490 0.0027399372 0.0088026118 0.0010384738 -0.0054267720 -0.0014494628 0.0033403847 0.0020174252 -0.7626032632 -0.1717228492 0.4009815949 -0.1429998883 -0.3211808762 -0.0195599814 -0.0947429393 -0.0220468385 0.0548007026 0.0002118033 0.0001366238 -0.0001147508 -0.0022595277 -0.0027452667 -0.0000927442 0.0246865147 0.0306601903 0.0023817240 0.0000113038 0.0000878370 -0.0000033380 -0.0001746490 0.0004282955 0.0001335800 -0.0003229094 -0.0006006204 0.0000483052 -0.0003331915 0.0000019407 0.0001532474 0.0000673443 0.0000556506 -0.0000227179 -0.0006355342 -0.0000068489 0.0002665730 0.0037872117 0.0064698596 -0.0006770139 0.0038759911 0.0001914547 -0.0017459505 -0.0004620366 -0.0007587055 0.0001061248 0.0069889746 0.0000639055 -0.0029030791 0.0021972079 -0.0044985223 -0.0015507398 -0.0002020890 -0.0004105104 -0.0001431078 0.0032109861 -0.0021045293 -0.0013217137 0.0000005541 -0.0000055809 -0.0000370811 0.0000013394 -0.0000001033 -0.0000116561 0.0000087209 0.0000337981 0.0000275702 -0.0000234884 -0.0000153835 -0.0000042707 0.0000134766 0.0000021676 -0.0000000922 -0.0000056007 0.0000431663 0.0000731061 -0.0000031842 -0.0000307069 -0.0000102257 0.0000049208 0.0000017126 -0.0000026803 0.0000071067 -0.0000063724 -0.0000104154 0.0000056285 0.0000064542 0.0000144566 0.0001796395 -0.0004925731 -0.0007767572 -0.0002241504 -0.0000878754 -0.0000827616 0.0000451240 0.0000627496 -0.0000577216 -0.0001659970 0.0002738593 -0.0000178303 0.0000281554 -0.0000339810 -0.0000221568 0.0001191406 0.0001130058 0.0001515545 -0.0000181569 0.0000344293 -0.0000000004 -0.0000777621 -0.0000473079 -0.0000143559 -0.0000052253 -0.0000195193 0.0000511767 0.0000074117 -0.0000272263 0.0000242328 0.0000357662 -0.0000076164 -0.0000183645 -0.0001083746 -0.0000017600 -0.0001286035 0.0000016335 0.0000002725 0.0000046077 0.0000201193 -0.0000547169 -0.0000565732 -0.0000375456 -0.0000141310 -0.0000315581 -0.0000037411 0.0000034611 0.0000027236 0.0000036997 -0.0000047005 -0.0000028089 -0.0000204553 -0.0000069768 -0.0000181372 -0.0002057305 0.0005442861 0.0006182807 0.0004189420 0.0001801892 0.0003448736 0.0000125482 -0.0000021736 -0.0000014397 -0.0000121222 0.0000621568 0.0000619660 0.0002202622 0.0000910253 0.0002245087 -0.0000159082 -0.0000076582 0.0000046288 -0.0000337214 0.0000053017 0.0000482229 0.0000338956 -0.0000202238 -0.0000252300 0.0000767609 0.0002012240 0.0006202760 -0.0002227608 -0.0000691890 0.0001751751 -0.0000031251 0.0000002754 0.0000387056 0.0004207755 0.0001002217 -0.0002865337 0.0001209230 0.0000334465 -0.0000192153 -0.0008223586 -0.0020619468 -0.0071443206 0.0020875161 0.0006012078 -0.0019592170 -0.0000043579 0.0000014897 0.0000027605 -0.0000062544 -0.0000013754 0.0000002899 -0.0000444564 0.0000307356 -0.0000293109 -0.0000759525 0.0000173611 0.0000229692 0.0000018579 0.0000015870 -0.0000007756 -0.0000039324 -0.0000007165 0.0000005238 0.0000011633 -0.0000246347 0.0000096804 -0.0000376892 -0.0000153491 0.0000124135 0.0000088960 0.0002610442 -0.0001007660 0.0004233785 0.0001812766 -0.0001376835 0.0000007084 -0.0000314218 0.0000116458 -0.0000203927 0.0000165019 -0.0000023862 0.0000163925 0.0003702946 -0.0001461612 0.0002511126 -0.0001697164 0.0000206526 -0.0000020566 -0.0000005422 -0.0000026012 0.0000007565 -0.0000019559 0.0000027098 0.0000096727 0.0000524563 -0.0000239108 -0.0000096450 -0.0000154043 -0.0000032683 -0.0001100761 -0.0006068918 0.0002953922 0.0001223358 0.0001413693 0.0000843016 0.0000107035 0.0000439414 -0.0000201256 -0.0000305771 0.0000103316 -0.0000552577 -0.0000961607 -0.0004705444 0.0002422390 0.0003298735 -0.0001413500 0.0006235758 -0.0000421393 0.0001709658 0.0002384150 -0.0001484713 -0.0018403229 -0.0024611944 0.0009287661 -0.0004642312 -0.0001054643 -0.0000699335 0.0002851964 -0.0003900102 -0.0000310940 -0.0000839883 0.0000525874 -0.0002389785 0.0001239318 -0.0004254032 0.0006112909 0.0005768374 -0.0004561332 0.0001189741 0.0002988875 0.0002572302 0.0000597680 0.0000765927 -0.0000467494 0.0000619460 -0.0055937478 0.0021483009 -0.0000853508 0.0004554534 -0.0001670565 0.0001140826 -0.0003792888 0.0001293413 0.0000478207 -0.0000664746 0.0000067794 0.0000423381 0.0000709062 0.0000301501 -0.0001276637 -0.0000099480 0.0000566869 -0.0000128251 0.0000280163 -0.0000453484 0.0000074536 -0.0000324004 0.0000203170 -0.0001350754 -0.0004972595 0.0002890856 -0.0000270607 0.0000276988 -0.0000207364 0.0000981678 0.0000626721 0.0000033693 -0.0000075768 -0.0000494238 -0.0000086118 0.0000107395 0.0000202763 -0.0000067752 0.0000064818 0.0000169071 0.0000054868 0.0000568623 0.0000964527 -0.0000103410 -0.0000249475 0.0000354030 0.0000377626 0.0000003652 -0.0000036150 -0.0000012613 0.0000007986 -0.0000024850 -0.0000017688 -0.0000335820 -0.0000051544 0.0000189209 0.0000244231 0.0000563187 0.0000048305 0.0000395553 0.0000070837 -0.0000228136 -0.0000044278 -0.0000122419 -0.0000016015 0.0003675800 0.0000575883 -0.0002067117 -0.0002819439 -0.0006133444 -0.0000319744 -0.0004405856 -0.0001077993 0.0002540956 -0.0000065920 -0.0000064205 0.0000030904 0.0000543203 0.0000668662 0.0000057699 -0.0006295574 -0.0007702487 -0.0000563083 0.0000091239 0.0000012772 -0.0000040769 -0.0000281242 0.0000714477 0.0000212885 -0.0000553879 -0.0001069420 0.0000069240 -0.0001195398 -0.0000035592 0.0000543791 0.0000052909 -0.0000089074 -0.0000037730 -0.0001239703 0.0000011784 0.0000514497 0.0006685278 0.0011706749 -0.0001115874 0.0013583882 0.0000315076 -0.0006204475 -0.0000050582 0.0000370852 0.0000009839 0.0013648136 0.0000248516 -0.0005688202 0.0003560299 -0.0007274978 -0.0002584477 0.0000445439 0.0000102002 -0.0000002574 -0.0006784637 -0.0000680577 0.0000041097 0.0000031560 0.0000073677 0.0000087544 0.0000001849 0.0000010519 -0.0000003004 -0.0000083621 -0.0000043132 -0.0000000487 0.0000070377 0.0000059845 -0.0000014905 -0.0000030472 -0.0000048322 0.0000063942 -0.0000096537 -0.0000136515 -0.0000199937 0.0000412594 0.0000113206 -0.0000002694 -0.0000025116 -0.0000132536 0.0000107885 0.0000026847 0.0000004020 -0.0000012458 -0.0000212032 -0.0000143072 0.0000231214 -0.0000393249 0.0001207988 0.0002346962 0.0001319846 0.0000344973 0.0000535573 0.0000296801 0.0000553030 -0.0000665905 -0.0000750889 0.0000969243 -0.0000172749 -0.0003876260 -0.0000912485 0.0000786529 -0.0000539857 -0.0001015978 -0.0001207700 -0.0000788719 0.0000864243 -0.0000144734 0.0000750163 0.0000398082 0.0000190573 0.0000448568 0.0000808235 -0.0001872425 0.0000332451 0.0001962406 -0.0001555294 0.0002366744 0.0000048845 -0.0000945107 -0.0000270149 0.0000075197 -0.0000221098 -0.0000239925 0.0000335275 0.0000025172 0.0000744755 -0.0001757290 -0.0001504150 0.0000027086 0.0000234620 0.0000248819 0.0000221690 -0.0000090790 0.0000010897 0.0000067374 -0.0000475961 -0.0000537131 0.0000234059 -0.0000087796 0.0000098841 -0.0006156952 0.0018181012 0.0016460765 -0.0001871582 -0.0001203357 -0.0002220056 -0.0000315316 0.0000083424 0.0000011557 -0.0001737078 0.0005302603 0.0005281874 -0.0000854282 0.0000074553 -0.0000480753 -0.0000045545 -0.0000127881 -0.0000330231 -0.0000360560 -0.0000080149 0.0000345453 -0.0000014747 -0.0000020475 -0.0000029757 -0.0000012790 0.0000125302 0.0000439164 0.0000981531 0.0000239658 -0.0000930179 0.0000337211 0.0001389610 0.0003977382 0.0004261122 0.0000955934 -0.0003541244 0.0000036442 0.0000001664 0.0000014992 -0.0000440393 -0.0001854443 -0.0005080977 -0.0011286083 -0.0003115329 0.0010354030 0.0000102901 -0.0000051394 -0.0000062131 0.0000131092 0.0000002588 0.0000030261 -0.0000006371 0.0000000465 0.0000002554 -0.0000027552 0.0000004477 0.0000008690 -0.0003024391 0.0002436423 -0.0000796332 -0.0025060818 0.0013407788 -0.0000104311 -0.0008513627 0.0076051273 -0.0028725486 0.0179572341 0.0090931813 -0.0065025605 -0.0016543961 -0.0775584536 0.0310656814 -0.1977828903 -0.0873969402 0.0670583454 -0.0055686769 -0.0713867931 0.0273241357 0.0359872144 -0.0204699432 0.0011162967 0.0370591296 0.8022933207 -0.3071092333 -0.3674082791 0.2419358161 -0.0234319248 -0.0002385321 0.0000020966 0.0002934394 0.0000053530 0.0001151090 -0.0000620391 -0.0002282003 -0.0008764784 0.0006797163 -0.0003715298 -0.0002631227 -0.0003214389 0.0020501123 0.0093105509 -0.0048834859 0.0033358817 0.0037114299 0.0022787230 0.0000735125 0.0001009100 0.0000093772 -0.0001677424 0.0000175710 -0.0002782119 -0.0002144268 -0.0010632331 0.0005510624 0.0015930887 -0.0007183695 0.0029970424 -0.0000005064 -0.0000067735 -0.0000047877 0.0000040687 0.0000637776 0.0000828708 -0.0000027571 0.0000047651 0.0000060813 -0.0000031263 0.0000263721 -0.0000221122 0.0000090728 0.0000065858 -0.0000041457 -0.0000285887 0.0000133129 -0.0000257937 -0.0001102621 -0.0000970287 0.0000759776 0.0000043143 0.0000070347 0.0000139712 0.0000039586 -0.0000024223 0.0000015994 0.0000192390 0.0001052784 -0.0000379856 -0.0000009642 -0.0000053391 0.0000026482 0.0000018496 0.0000007939 -0.0000002782 -0.0000078666 -0.0000043069 0.0000026128 -0.0000002936 0.0000000988 0.0000005782 -0.0000007293 -0.0000018469 0.0000003557 -0.0000013837 -0.0000068081 0.0000037927 -0.0000001254 -0.0000002837 -0.0000009057 0.0000181299 0.0000837940 -0.0000535996 -0.0000004101 0.0000022130 -0.0000015428 0.0000041857 0.0000054919 -0.0000040733 -0.0000018616 -0.0000048489 0.0000053324 0.0000039580 0.0000034663 -0.0000056477 -0.0000012991 0.0000085779 -0.0000035407 -0.0000167558 0.0046894539 0.0006430805 0.0042153988 -0.0066813188 -0.0048530581 -0.0004007434 0.0006199659 0.0004569355 -0.0001140046 -0.0000703371 0.0000735596 -0.0005592786 -0.0001684593 0.0002808271 0.0005814151 0.0012341774 0.0000553000 -0.0002826709 -0.0001526903 0.0001237230 -0.0000010962 -0.0000113857 -0.0000089574 0.0061989256 0.0014269095 -0.0032602656 -0.0063450584 -0.0140154828 -0.0007986929 0.0043323785 0.0009509172 -0.0024151574 -0.0001897772 -0.0006563986 -0.0000935479 -0.0048980473 -0.0068122292 -0.0007479486 0.0626706669 0.0798861473 0.0065089317 -0.0012233898 -0.0025168105 0.0000789896 -0.0111208067 0.0187406254 0.0072804838 -0.0036444238 -0.0065373758 0.0005309173 0.0645455159 0.0008541145 -0.0295954281 0.0221982988 0.0408526973 -0.0046015320 -0.0133856493 -0.0010335900 0.0054266700 0.0393839579 0.0674973636 -0.0066622938 -0.7282777351 -0.0273811885 0.3302959346 -0.2499379801 -0.4307810541 0.0571656138 0.1421672877 0.0025419383 -0.0587344292 0.1049126211 -0.2075113015 -0.0726587245 0.0000035145 0.0000242702 0.0000170652 -0.0000221359 -0.0000385721 0.0000044368 0.0000001107 0.0000015445 0.0000037884 -0.0000028075 0.0000269810 0.0000341723 0.0000921662 0.0000282435 -0.0000264398 -0.0000045596 -0.0000360790 0.0000352710 -0.0000479698 0.0000137837 -0.0000074686 0.0000213145 -0.0000115975 -0.0000468823 -0.0005293177 0.0012762473 0.0002788321 -0.0000316022 0.0000332273 -0.0000310787 -0.0000270573 0.0000073397 0.0000182738 0.0000259016 0.0000969465 -0.0001002991 -0.0000674556 0.0002177166 0.0003586467 0.0000341067 0.0000063373 0.0000108848 -0.0001168479 -0.0001266052 0.0001777944 0.0089251122 -0.0123242558 0.0023794803 0.0033549111 0.0006077758 0.0000344173 -0.0006761821 -0.0037413517 -0.0036538960 0.0003175193 -0.0004286444 -0.0000081049 0.0002453963 0.0001109432 0.0000627839 -0.0000115811 -0.0001536581 0.0002279574 -0.0000634748 -0.0012789052 0.0014835347 -0.0002379548 0.0000244867 0.0000393208 0.0000813560 0.0001486220 -0.0000881746 -0.0000008080 -0.0000094470 -0.0000090016 -0.0000358904 0.0002077279 0.0002131820 -0.0006194161 -0.0002940582 -0.0005996728 -0.0000195789 0.0000255673 0.0000823077 0.0000047420 -0.0000014086 -0.0000034754 0.0000642263 0.0000345763 0.0000695307 0.0007472857 -0.0025977563 -0.0023555467 0.0071442855 0.0031651013 0.0064159632 0.0000684543 -0.0001244038 -0.0002500001 0.0000181110 0.0000640350 0.0001324964 -0.0008161263 -0.0003351553 -0.0008080605 0.0000002937 0.0000055682 0.0000180633 0.0000283749 0.0000059794 -0.0000262541 0.0000004113 0.0000003211 0.0000036366 -0.0000050681 -0.0000032056 -0.0000058998 0.0000744073 0.0000194841 -0.0000666975 -0.0000175574 -0.0000713921 -0.0002097893 -0.0003352237 -0.0000722690 0.0002808458 -0.0000015615 0.0000027466 0.0000045564 0.0000166990 0.0000094675 0.0000427377 -0.0008303580 -0.0002219895 0.0007453535 -0.0000187478 0.0001077463 0.0000823350 0.0001200082 0.0001330556 0.0000103242 -0.0000008330 0.0000011332 -0.0000047706 0.0000017577 -0.0000003601 -0.0000011426 -0.0000008797 -0.0000000453 -0.0000001472 -0.0000029687 0.0000011647 -0.0000002093 -0.0000011090 0.0000101694 -0.0000036743 0.0000262966 0.0000131602 -0.0000092682 0.0000013079 -0.0000883596 0.0000378744 -0.0002973975 -0.0001257939 0.0001009623 -0.0000034886 -0.0000458797 0.0000172389 0.0000371730 -0.0000235972 0.0000020311 0.0000154441 0.0005091412 -0.0001857711 -0.0004083664 0.0002725790 -0.0000273662 0.0000006571 0.0000011209 0.0000003212 -0.0000000801 0.0000002958 -0.0000006961 -0.0000004314 -0.0000010253 -0.0000005754 0.0000045078 0.0000053184 0.0000024659 0.0000003988 0.0000059394 0.0000036027 -0.0000488873 -0.0000565628 -0.0000312557 -0.0000017750 -0.0000075429 0.0000029282 0.0000078500 -0.0000031054 0.0000139834 0.0000148299 0.0000791848 -0.0000429199 -0.0000853322 0.0000346107 -0.0001598904 -0.0000546088 0.0001893787 0.0002684978 -0.0000178085 -0.0019383302 -0.0023711498 0.0013459561 -0.0006360091 -0.0000094222 -0.0000829073 0.0002324638 -0.0004291120 -0.0000113964 -0.0000044940 0.0000013176 -0.0000007977 0.0000177822 0.0000391028 0.0000156703 0.0001238617 -0.0000771678 -0.0000168756 -0.0000421470 -0.0000354725 -0.0000001565 0.0000011103 0.0000003192 -0.0000022212 0.0000343206 -0.0000158429 -0.0000001608 -0.0000033210 0.0000011134 0.0000004281 -0.0000004842 -0.0000000962 -0.0000018063 -0.0000004320 0.0000001211 -0.0000056156 0.0000001560 -0.0000075622 0.0000022617 0.0000017191 0.0000006052 -0.0000009389 0.0000035640 -0.0000041310 -0.0000000694 -0.0000042085 -0.0000024551 -0.0000059719 -0.0000470773 0.0000211813 0.0000016676 0.0000065056 0.0000063275 0.0000021817 0.0000034198 0.0000057006 -0.0000037369 -0.0000030008 -0.0000096803 -0.0000056040 -0.0000028533 0.0000179951 0.0000266404 0.0000143994 0.0000136493 0.0086075958 0.0187304007 0.0045409624 -0.0716779558 0.1133356771 0.0824809454 0.0070922042 -0.0103247939 -0.0078690978 0.0000161644 0.0008648171 0.0001508807 0.0088262843 0.0027276277 -0.0043900262 -0.0117924205 -0.0249250174 -0.0011467577 0.0006320904 0.0013100572 0.0000654827 -0.0001147412 0.0003231863 0.0001637997 -0.0964321390 -0.0224819803 0.0504633142 0.1269691587 0.2801634524 0.0157147088 -0.0183542795 -0.0042907699 0.0094224299 -0.0026381512 -0.0022732021 0.0013175145 0.0514056226 0.0624454247 0.0035918399 -0.5766323503 -0.7114088882 -0.0551349853 0.0000546891 -0.0021467277 -0.0002604928 -0.0006824601 0.0004183077 0.0003406170 0.0027216245 0.0046743427 -0.0005002870 0.0082828549 -0.0002859435 -0.0038409225 0.0019785720 0.0038787258 -0.0003723358 0.0013732919 -0.0001367708 -0.0006471948 -0.0319796480 -0.0522588148 0.0065340200 -0.0929553145 -0.0037137600 0.0419096915 -0.0231830273 -0.0401773486 0.0053537969 -0.0165748942 0.0003878288 0.0070217532 0.0036612312 -0.0067299598 -0.0023524287 0.0001981002 -0.0000253449 -0.0000425002 -0.0029384969 -0.0005393638 -0.0001113452 0.0000046148 0.0000195851 0.0000531694 -0.0001689305 -0.0003604828 -0.0006783708 0.0000848719 0.0007983864 0.0003401956 -0.0003580251 -0.0003106665 -0.0000345793 0.0000868565 0.0000478953 -0.0000310822 -0.0000061480 0.0000566946 0.0000731936 -0.0001320183 0.0001999777 0.0000740918 -0.0000007706 0.0000045797 -0.0000137491 0.0001682089 -0.0001270379 -0.0001243100 -0.0001184144 0.0001280780 0.0001447531 0.0002190469 -0.0005524230 -0.0008823990 -0.0005116187 -0.0001252511 -0.0001629456 0.0000401300 -0.0001666131 0.0002074343 0.0014980440 -0.0022087756 0.0002972317 0.0008914352 0.0002095472 0.0001430522 -0.0003855441 -0.0006815493 -0.0007765501 0.0000458002 0.0000004980 -0.0000271283 -0.0002573327 -0.0001890436 -0.0000841842 -0.0000265424 -0.0000764739 0.0003792003 -0.0000703109 -0.0005672815 0.0000478810 0.0018465850 -0.0001438224 -0.0008017650 -0.0004547093 -0.0002189620 -0.0006069327 -0.0000048707 -0.0000020149 -0.0000057276 -0.0000194982 0.0000914960 0.0000895140 -0.0001063220 -0.0000494161 -0.0001041597 0.0000006643 0.0000009149 0.0000092113 0.0000004044 0.0000038514 0.0000045260 -0.0000070594 -0.0000025946 -0.0000062391 0.0003088033 -0.0010671804 -0.0009733614 0.0012010523 0.0005009552 0.0011391941 -0.0000137127 -0.0000243801 -0.0000468508 0.0000159082 -0.0000457001 -0.0000507428 0.0000807639 0.0000354784 0.0000756111 -0.0000078081 -0.0000397387 -0.0001199423 -0.0000848256 -0.0000206155 0.0000733506 0.0000222724 0.0000208998 -0.0000355693 0.0000128156 0.0002045646 0.0007185851 0.0010209065 0.0002588604 -0.0009378207 0.0001382915 0.0004979948 0.0014278956 0.0010188875 0.0001861484 -0.0008698720 -0.0000097725 -0.0000595169 -0.0000843195 -0.0008878669 -0.0026705957 -0.0082801553 -0.0117735969 -0.0031689011 0.0106258523 -0.0000006198 0.0000153827 0.0000168728 0.0000268242 0.0000254769 0.0000082921 0.0000334273 -0.0000211681 0.0000855765 -0.0000096102 0.0000024084 0.0000178405 0.0000005831 -0.0000000437 -0.0000001194 0.0000006862 -0.0000004312 -0.0000010671 0.0000004563 -0.0000110588 0.0000043138 -0.0000141076 -0.0000059126 0.0000046935 0.0000011797 0.0001206919 -0.0000506617 0.0001533029 0.0000685208 -0.0000541578 0.0000027270 0.0000312851 -0.0000127634 -0.0000104412 0.0000056801 -0.0000002523 -0.0000199856 -0.0003485563 0.0001385199 0.0000995731 -0.0000638605 0.0000047298 -0.0000031348 -0.0000037174 -0.0000037209 -0.0000000290 -0.0000001565 0.0000018691 0.0000241390 0.0001500397 -0.0000755834 0.0000211899 0.0000173527 0.0000204355 -0.0002966772 -0.0016986693 0.0008436092 -0.0001906817 -0.0002105092 -0.0001403198 0.0000010869 0.0000055136 -0.0000023016 -0.0000054977 0.0000004417 -0.0000084556 -0.0000083554 -0.0000525966 0.0000264001 0.0000629245 -0.0000184528 0.0001093740 -0.0001395158 -0.0011320748 -0.0018943124 -0.0001281184 0.0136540141 0.0165266155 -0.0034977101 0.0010821063 -0.0004020884 0.0006030112 -0.0022872144 0.0035894707 -0.0001475199 -0.0002520726 0.0001158872 -0.0002743204 0.0000275975 -0.0000926894 0.0016958617 0.0027217345 -0.0019119579 0.0001502710 0.0009813572 0.0010897460 -0.0000029695 -0.0000000243 0.0000008515 -0.0000124952 -0.0000891027 0.0000368893 0.0000002997 0.0000057362 -0.0000021831 -0.0000020792 0.0000057754 0.0000052461 0.0000311282 0.0000173878 -0.0000054865 0.0002001690 0.0000369411 0.0002589110 -0.0000526803 0.0000053535 -0.0000411208 0.0001513335 0.0001654469 -0.0000125231 -0.0000731705 0.0001321257 0.0002696336 -0.0004053098 -0.0008993087 0.0005447749 0.0000306182 -0.0003306874 -0.0001780869 -0.0000008024 -0.0000511255 -0.0000216218 -0.0000892676 0.0000621367 0.0000311006 0.0000457924 0.0000154662 -0.0000355542 0.0000221402 -0.0000218452 0.0000048104 0.0003600204 0.0008805239 0.0002240238 0.0064541645 -0.0101661978 -0.0074438207 -0.0007376184 0.0009511577 0.0007529590 -0.0000432726 -0.0000897737 -0.0000212500 -0.0013167496 -0.0003737296 0.0006692642 0.0018146873 0.0040089211 0.0002421638 0.0017178103 0.0002549910 -0.0010310932 0.0000152042 -0.0000888111 -0.0000367678 0.0144494095 0.0033489829 -0.0076447475 -0.0200302278 -0.0445382336 -0.0025480219 -0.0186205514 -0.0042732470 0.0107541615 -0.0001190965 -0.0000854781 0.0000653549 0.0022008548 0.0026565613 0.0001358701 -0.0245694072 -0.0303118618 -0.0023351882 0.0000010295 -0.0000912270 -0.0000098023 -0.0000242704 0.0000077194 0.0000110435 0.0001107680 0.0001911441 -0.0000206393 0.0003463525 -0.0000117767 -0.0001603200 0.0000795521 0.0001579158 -0.0000146439 0.0000707654 -0.0000041618 -0.0000325643 -0.0012925821 -0.0021165730 0.0002670390 -0.0038993068 -0.0001728549 0.0017563308 -0.0009522226 -0.0016424295 0.0002230304 -0.0008404069 0.0000129161 0.0003560795 0.0000962951 -0.0001713451 -0.0000582426 0.0001089486 0.0000205183 0.0000000632 -0.0016922864 -0.0000087483 0.0000251415 -0.0003902825 -0.0013639361 -0.0034319093 -0.0000044517 -0.0000083884 -0.0000166932 0.0000012214 0.0000156048 0.0000033942 -0.0000065082 -0.0000050037 -0.0000007044 0.0000006053 -0.0000026339 0.0000018455 -0.0000132182 0.0000046885 0.0000120021 0.0000122381 0.0000202560 0.0000065585 -0.0000011841 0.0000010916 -0.0000004279 0.0000025723 -0.0000014719 0.0000000981 -0.0000007026 0.0000021490 -0.0000013526 -0.0000081128 -0.0001772355 -0.0000233371 0.0000650122 0.0000277201 0.0000378712 0.0000818356 0.0000758844 -0.0001772460 0.0000744402 -0.0001154150 0.0000016247 -0.0001359269 -0.0000133488 0.0000431209 -0.0000763041 -0.0000944909 -0.0001221343 -0.0000081379 0.0000093054 0.0000035503 0.0000081163 0.0000018576 0.0000031426 0.0000014460 -0.0000042104 -0.0000061368 -0.0000061117 -0.0000231199 0.0000072283 0.0000042016 -0.0000031917 -0.0000033973 0.0000080590 -0.0000069945 0.0000066586 -0.0000080897 -0.0000023434 -0.0000093125 -0.0000522193 0.0001756305 0.0001671754 -0.0000511834 -0.0000322506 -0.0000590367 0.0000020989 0.0000005849 0.0000011275 -0.0000047958 0.0000125014 0.0000120627 0.0000072349 0.0000010982 0.0000048505 0.0006176919 -0.0019784231 -0.0018514704 0.0006727240 0.0003024671 0.0006500415 -0.0000083444 -0.0000007871 -0.0000030483 0.0000505469 -0.0001459881 -0.0001434235 -0.0000669934 -0.0000246031 -0.0000614682 0.0004934536 0.0003574779 0.0005020257 -0.0020840382 -0.0003850042 0.0020386018 -0.0005692058 -0.0002887930 0.0001613000 0.0012208987 -0.0060094789 -0.0226976209 -0.0607522773 -0.0155655421 0.0555609857 -0.0011697863 -0.0026927658 -0.0070438668 0.0255586364 0.0057744940 -0.0217371505 0.0001247946 -0.0000982468 -0.0003178568 0.0225760337 0.0895601518 0.2691260332 0.6927756771 0.1867263757 -0.6248643626 0.0000022610 -0.0000000245 -0.0000003101 0.0000042598 0.0000023628 0.0000017038 -0.0001867247 -0.0000148803 0.0001482761 -0.0000189172 0.0000166783 0.0000366542 -0.0000004778 -0.0000019546 0.0000006696 0.0000014771 0.0000031910 -0.0000017649 -0.0000015233 0.0000205861 -0.0000076677 0.0000330161 0.0000155710 -0.0000112946 -0.0000072968 -0.0002087675 0.0000845341 -0.0003731958 -0.0001610407 0.0001253748 -0.0000100472 -0.0001034228 0.0000406888 0.0000615578 -0.0000352379 0.0000025957 0.0000553916 0.0011686936 -0.0004461339 -0.0006450097 0.0004253330 -0.0000439889 0.0000048277 -0.0000012313 0.0000095386 -0.0000130946 -0.0000324739 -0.0000041919 -0.0000122518 -0.0000708909 0.0000285370 -0.0000022547 0.0000002230 -0.0000035628 0.0001487104 0.0008169831 -0.0003943505 0.0000100450 0.0000237564 0.0000131087 0.0000083832 0.0000122055 0.0000024507 -0.0000127448 0.0000006161 -0.0000193749 -0.0000209433 -0.0000497706 0.0000197914 0.0001156444 -0.0000392089 0.0002148854 -0.0000104794 -0.0000278903 -0.0000594565 -0.0000284955 0.0003676199 0.0004017776 -0.0000723616 0.0000011304 -0.0000277450 0.0000260146 -0.0000909633 0.0001477703 0.0000177638 0.0000243270 0.0000053993 -0.0000433835 0.0000333431 -0.0000971454 -0.0001993896 -0.0001755948 0.0001198108 0.0000196003 -0.0001103404 -0.0001012332 -0.0000005917 0.0000019807 -0.0000002387 -0.0000093849 -0.0001379944 0.0000526604 0.0000005351 0.0000096894 -0.0000038611 0.0000003921 0.0000008440 -0.0000008917 -0.0000056586 -0.0000013709 0.0000011235 -0.0000212723 0.0000014577 -0.0000319387 0.0000045557 -0.0000025053 0.0000061314 -0.0000090471 0.0000021461 -0.0000061062 0.0000084684 -0.0000062400 -0.0000184460 -0.0000129897 -0.0001335613 0.0000952573 0.0000069224 0.0000138979 0.0000173476 0.0000062485 0.0000013097 -0.0000028120 -0.0000088610 -0.0000010714 0.0000065448 0.0000177110 -0.0000051562 0.0000075232 -0.0000100490 -0.0000202702 -0.0000065061 0.0027302000 0.0072421767 0.0021498043 0.1524681838 -0.2399498142 -0.1755455448 -0.0157115810 0.0215225428 0.0169648682 -0.0005745656 -0.0013765793 -0.0003081829 -0.0180962157 -0.0055197837 0.0090597232 0.0294824949 0.0644883377 0.0038365592 0.0235352226 0.0029652882 -0.0143288587 0.0002452688 -0.0010919600 -0.0005078517 0.1972780804 0.0457815601 -0.1033010663 -0.3233351894 -0.7165631061 -0.0411524438 -0.2525726888 -0.0574794314 0.1461369055 -0.0009595665 -0.0006435732 0.0005483450 0.0190287612 0.0229806615 0.0011447910 -0.2126953909 -0.2623887121 -0.0201985783 0.0000282925 -0.0007406833 -0.0000779635 -0.0000482283 -0.0001618175 -0.0000045698 0.0009484576 0.0016187633 -0.0001802626 0.0018655884 -0.0001147787 -0.0008686726 0.0002673892 0.0005904166 -0.0000401967 0.0006078158 -0.0000202543 -0.0002777087 -0.0110018828 -0.0179245869 0.0022953510 -0.0208638445 -0.0009247471 0.0093583030 -0.0033915635 -0.0059288565 0.0007976787 -0.0071572219 0.0001207524 0.0030243729 -0.0004931559 0.0011377988 0.0004084655 0.0002514286 0.0001329879 0.0000457710 -0.0036115845 0.0003262176 -0.0001264713 0.0000327906 0.0001047660 0.0002440871 -0.0000478958 -0.0000793100 -0.0001293737 0.0000215066 0.0001724571 0.0000594148 -0.0000833977 -0.0000788692 -0.0000066648 0.0000150117 0.0000156667 -0.0000153433 0.0000064224 0.0000091404 0.0000116673 -0.0000244351 0.0000710775 0.0000396716 -0.0000035634 0.0000029937 -0.0000031589 0.0000366604 -0.0000296745 -0.0000186298 -0.0000383103 0.0000267367 0.0000251532 0.0000253082 -0.0000703593 -0.0001826693 -0.0001320915 -0.0000315330 -0.0000386715 -0.0000271975 -0.0000901812 0.0001300976 0.0004365782 -0.0006848966 0.0000777656 0.0002036100 0.0000767677 0.0000629670 -0.0002233414 -0.0003451081 -0.0004314006 0.0000538770 -0.0000574057 -0.0000090855 -0.0000288425 -0.0000272785 -0.0000207023 -0.0000199909 -0.0000263672 0.0001421163 -0.0000205693 -0.0001058232 -0.0000421281 0.0004578488 -0.0000273074 -0.0002039156 -0.0000069397 -0.0000580010 -0.0000343798 -0.0000028665 0.0000029444 0.0000011156 0.0000170391 -0.0000438702 -0.0000379065 0.0000297411 0.0000208863 0.0000339764 0.0000046644 -0.0000050493 -0.0000015637 0.0000000560 0.0000033067 0.0000035154 -0.0000221165 -0.0000101924 -0.0000231094 -0.0001676892 0.0005031349 0.0004373054 -0.0004146366 -0.0002288319 -0.0003672538 -0.0000121569 -0.0000080044 -0.0000140034 0.0000170036 -0.0000491138 -0.0000446803 0.0002716259 0.0001120606 0.0002767045 -0.0000411652 0.0000096097 0.0000863036 0.0001912035 0.0000416571 -0.0001814194 0.0000158515 -0.0000210437 0.0000362978 -0.0001495709 0.0002372124 0.0010031671 0.0042806925 0.0011009682 -0.0039011693 -0.0000230092 -0.0002980146 -0.0008831986 -0.0023585747 -0.0005212365 0.0020569937 0.0000695002 0.0001186727 0.0001180544 -0.0007212886 -0.0042167638 -0.0123665186 -0.0486125171 -0.0130931804 0.0438056112 0.0000016227 0.0000048301 0.0000051195 0.0000119389 0.0000090309 0.0000036562 -0.0000616223 0.0000768645 -0.0001514609 -0.0000292096 0.0000115664 -0.0000096168 0.0000009055 -0.0000003757 0.0000003860 0.0000048068 -0.0000034735 0.0000036199 -0.0000000809 0.0000098086 -0.0000039179 -0.0000056397 -0.0000070902 0.0000036112 -0.0000043116 -0.0001362499 0.0000547117 0.0000802957 0.0000289426 -0.0000255117 0.0000054545 0.0000895274 -0.0000319684 -0.0000477725 0.0000279190 -0.0000013340 -0.0000375493 -0.0010088677 0.0003702988 0.0005087622 -0.0003399937 0.0000331924 0.0000067925 0.0000086867 0.0000051806 0.0000018444 0.0000020981 -0.0000009851 -0.0000585274 -0.0003769846 0.0001946497 -0.0000754149 -0.0000704769 -0.0000650587 0.0007365028 0.0042770647 -0.0021489954 0.0007317629 0.0008189461 0.0005219109 0.0000061345 0.0000265531 -0.0000123305 -0.0000149144 0.0000102605 -0.0000308095 -0.0000596194 -0.0003033329 0.0001592372 0.0001584796 -0.0000837856 0.0003130103 -0.0001353641 -0.0001112910 -0.0003702609 -0.0005059459 0.0020259549 0.0017313179 0.0002109048 -0.0004184058 -0.0004206444 0.0001594826 -0.0007480381 0.0013058573 -0.0000353364 0.0000029285 -0.0000244825 0.0003056984 -0.0002359132 0.0006544161 -0.0000429470 0.0001407556 -0.0003476724 0.0002454410 0.0003287067 0.0000116687 0.0000139100 0.0000368878 0.0000007052 0.0000069685 0.0003273168 -0.0001281238 -0.0000345513 -0.0000224533 0.0000201824 -0.0000049182 -0.0000569482 -0.0000730696 0.0000744970 -0.0000685951 0.0000116594 0.0000634014 0.0000706505 0.0000261181 0.0001277744 0.0004720810 -0.0001226701 -0.0001228164 -0.0002155254 0.0000147644 0.0000002053 -0.0000653373 0.0001031273 0.0008569503 0.0026242607 -0.0014244067 0.0000659481 -0.0000305891 0.0000530793 -0.0000214093 -0.0000261711 -0.0000007973 -0.0000191687 0.0000344203 -0.0000011274 0.0000117036 -0.0000123259 -0.0000012615 0.0000060279 -0.0000117058 0.0000105779 -0.0000201199 -0.0000061202 0.0000049994 0.0010061607 -0.0015920871 -0.0011836415 -0.0001007761 0.0001432618 0.0001118860 -0.0000054986 -0.0000067031 0.0000008862 -0.0001397935 -0.0000411381 0.0000720831 0.0001705188 0.0003642789 0.0000196176 0.0000962768 0.0000090571 -0.0000597473 0.0000041472 -0.0000028401 -0.0000051869 0.0015454413 0.0003670341 -0.0008255865 -0.0018418785 -0.0040704591 -0.0002417965 -0.0009998384 -0.0002172978 0.0005748099 0.0000044840 0.0000012563 -0.0000030025 -0.0000011302 0.0000032922 0.0000024258 -0.0000274879 -0.0000274327 -0.0000052246 0.0000000427 0.0000005794 -0.0000000119 0.0000000684 0.0000013231 0.0000002387 0.0000033146 0.0000047480 -0.0000005425 -0.0000117799 -0.0000002115 0.0000054694 -0.0000050427 -0.0000100667 0.0000009455 -0.0000064605 -0.0000005161 0.0000025961 -0.0000392513 -0.0000617329 0.0000065671 0.0001372161 0.0000151525 -0.0000612041 0.0000667570 0.0001123944 -0.0000116358 0.0000732382 0.0000023200 -0.0000299864 0.0000089403 -0.0000153115 -0.0000023540 0.0000167884 -0.0000019636 0.0000004038 -0.0002917342 0.0000169101 -0.0000164404 -0.0000222575 -0.0000258735 -0.0000076738 -0.0000016779 -0.0000020339 -0.0000038769 0.0000019339 0.0000093645 0.0000069975 -0.0000054685 -0.0000060852 -0.0000017872 0.0000022176 0.0000062147 0.0000025051 0.0000084782 -0.0000332057 -0.0000593178 -0.0000127230 0.0000017184 -0.0000008889 0.0000044064 0.0000000144 -0.0000042918 0.0000026025 -0.0000031845 -0.0000037914 0.0000041494 0.0000074398 0.0000003341 -0.0001450691 0.0003813943 0.0005316780 0.0001166293 0.0001050425 0.0000509815 -0.0000856693 -0.0001165263 0.0001544239 0.0000731531 -0.0001050918 0.0000111194 0.0000997457 0.0000396948 0.0000069806 -0.0000234898 0.0000183466 -0.0000149274 -0.0000073606 -0.0000050886 -0.0000021710 -0.0000396315 -0.0000392523 0.0000000221 -0.0000031184 -0.0000134778 0.0000348461 -0.0000088441 -0.0000653910 0.0000493475 -0.0000114585 -0.0000039848 0.0000027819 -0.0000291115 -0.0000038847 -0.0000354065 -0.0000087379 -0.0000081558 -0.0000183173 -0.0001020576 0.0003242100 0.0003026666 -0.0000687733 -0.0000520429 -0.0000880345 -0.0000025194 0.0000034768 0.0000014698 -0.0000089585 0.0000263778 0.0000262696 0.0000242486 0.0000092940 0.0000215733 0.0011407330 -0.0036683260 -0.0033659525 0.0009954109 0.0004664746 0.0009581490 0.0000016942 0.0000004750 0.0000010842 0.0001184431 -0.0002997921 -0.0002920949 -0.0002566617 -0.0001238207 -0.0002380321 0.0000126703 0.0000151394 0.0000141293 0.0000616141 0.0000110991 -0.0000670628 0.0000161356 0.0000113723 0.0000108889 -0.0000071748 -0.0000085943 -0.0000130870 -0.0000219885 0.0000016002 0.0000374985 -0.0000471901 -0.0000442725 -0.0001047495 -0.0007662568 -0.0001699909 0.0006571336 -0.0000243565 -0.0000116476 -0.0000097938 0.0000269258 0.0000703873 0.0001737175 0.0003988577 0.0001004960 -0.0004145373 -0.0000001254 -0.0000008208 -0.0000006272 -0.0000019683 -0.0000000079 0.0000000027 0.0000053840 0.0000062148 0.0000061593 0.0000113496 0.0000026272 -0.0000009988 -0.0000467494 -0.0001235595 0.0000321558 -0.0001321144 0.0000139679 -0.0005222812 0.0000975287 0.0000961277 -0.0000259319 0.0000519812 0.0001421901 -0.0000505426 -0.0000181205 -0.0007638694 0.0003109142 -0.0009985475 -0.0004096303 0.0003638805 0.0000868420 -0.0009590478 0.0000351342 0.0002261501 -0.0003091696 0.0000268081 0.0005185572 0.0112742461 -0.0036512853 -0.0034580082 0.0022720937 -0.0001335436 -0.0017524773 -0.0019529579 -0.0014666386 -0.0001704640 -0.0003273465 0.0001354726 0.0116336653 0.0743553926 -0.0381346091 0.0163824454 0.0156766472 0.0138099848 -0.1461697491 -0.8430463182 0.4209227125 -0.1637493068 -0.1848839867 -0.1162724777 -0.0008766443 -0.0033085772 0.0013654220 0.0031671927 -0.0025844526 0.0069045939 0.0067259548 0.0326117492 -0.0167078218 -0.0368370910 0.0172804311 -0.0709234956 -0.0000026697 0.0000064909 0.0000075284 -0.0000145225 -0.0000573220 -0.0000898191 0.0000553266 -0.0000268171 -0.0000117059 -0.0000101091 0.0000024691 -0.0000011453 0.0000051151 0.0000179153 -0.0000054583 0.0000560728 -0.0000230814 0.0000896672 -0.0000998005 -0.0000999313 0.0000675455 -0.0000339762 -0.0000874259 -0.0000906395 0.0001149559 0.0000274677 0.0002806974 0.0002521640 0.0026453328 -0.0008816593 0.0000783547 -0.0002631820 0.0000656080 0.0000088962 0.0000057622 0.0000028626 0.0000103950 -0.0000890300 0.0000194776 -0.0000500218 0.0000069128 -0.0000875344 0.0000111796 -0.0000029545 0.0000181087 0.0000016065 0.0000220444 -0.0000186751 0.0000088206 -0.0000061478 0.0000148659 -0.0000599830 -0.0002856689 0.0001819966 0.0000763629 -0.0000417052 0.0000992110 0.0001012300 0.0000855769 0.0001111293 -0.0000797684 0.0000363438 -0.0002706770 -0.0000329237 -0.0000459991 0.0001365758 0.0000275781 0.0004608038 0.0004298281 0.0000555412 -0.0001029993 0.0001118406 0.0001406820 -0.0001785393 -0.0001421406 -0.0000194616 0.0000236081 0.0000183683 0.0000277324 0.0000154276 -0.0000145703 0.0000158180 0.0000089558 -0.0000081893 0.0000430829 0.0001086932 0.0000099832 0.0000105084 -0.0000115975 -0.0000126939 -0.0000274102 -0.0000587418 -0.0000023126 -0.0000239926 0.0000933899 0.0001109477 -0.0005364987 -0.0011676381 -0.0000571697 -0.0001491410 -0.0000298778 0.0000966311 0.0000014783 0.0000171895 -0.0000043398 -0.0000478560 -0.0000588010 0.0000066819 0.0005092977 0.0006038326 0.0000330538 0.0000120718 0.0000265882 -0.0000018031 0.0000315545 -0.0000408678 -0.0000186660 0.0000013408 -0.0000043924 -0.0000008348 -0.0006385822 -0.0000198222 0.0002890192 -0.0000703055 -0.0001602842 0.0000106176 0.0000305732 0.0000042525 -0.0000119379 0.0000403410 0.0000653883 -0.0000039564 0.0073545517 0.0002864821 -0.0032982804 0.0008218793 0.0014868119 -0.0001833996 -0.0003099405 -0.0000047744 0.0001313261 -0.0002636097 0.0004928600 0.0001842698 -0.0005718104 -0.0000052485 0.0000208253 0.0096268412 0.0006255948 -0.0008120764 -0.0000012556 0.0000069895 0.0000065764 0.0000007720 -0.0000038486 -0.0000010894 0.0000044989 0.0000003846 -0.0000032721 -0.0000038934 0.0000023071 0.0000001788 0.0000068385 -0.0000086559 -0.0000020538 -0.0000179271 0.0000799698 0.0001514989 0.0000716200 0.0000062559 0.0000090319 -0.0000003972 -0.0000037366 0.0000064158 -0.0000039183 0.0000031805 0.0000032650 0.0000098044 -0.0000040652 -0.0000038729 0.0003099955 -0.0009843973 -0.0015884075 -0.0002547119 -0.0001080807 -0.0000827227 0.0001100292 0.0002030214 -0.0002192675 -0.0002826111 0.0002773580 -0.0000902000 -0.0006229663 -0.0002530725 0.0000651220 0.0000107065 -0.0000691018 -0.0001331393 -0.0000806391 0.0000662171 0.0000030002 0.0000420256 -0.0000061921 0.0000121764 0.0000135510 0.0000269975 -0.0000526172 0.0000035274 0.0000048417 -0.0000022206 -0.0001039565 0.0000010665 0.0000454348 -0.0000069253 0.0000009774 -0.0000060006 -0.0019894225 -0.0011462355 -0.0026700788 -0.0169680318 0.0569891814 0.0533062343 -0.0216946753 -0.0132370936 -0.0244329160 -0.0002967551 0.0009350227 0.0006805934 -0.0006115098 0.0023005323 0.0024686253 0.0012288885 0.0002930923 0.0008507342 0.2001566403 -0.6536798303 -0.5938339106 0.2841968293 0.1287251600 0.2700036241 -0.0003544591 -0.0002718746 -0.0004512729 0.0097481668 -0.0265376547 -0.0268750370 -0.0129929763 -0.0055059182 -0.0130031544 -0.0000035711 -0.0000039575 -0.0000053401 0.0000217441 0.0000055524 -0.0000155687 0.0000003635 -0.0000000300 -0.0000027017 0.0000006484 0.0000277017 0.0000978752 0.0001730930 0.0000439228 -0.0001596329 0.0000039818 0.0000252135 0.0000418236 -0.0002346749 -0.0000542833 0.0001973256 0.0000122342 0.0000059599 0.0000032023 -0.0000857424 -0.0003589657 -0.0011342672 -0.0019894133 -0.0004984128 0.0017714400 0.0000957292 -0.0000100224 0.0000086818 -0.0000320373 0.0002296299 0.0002675808 -0.0000029212 -0.0000019595 -0.0000032628 -0.0000065340 -0.0000011727 0.0000009185 -0.0000216913 0.0000266501 -0.0000191623 -0.0000260867 -0.0000008503 0.0000045954 0.0000038455 -0.0000198442 0.0000093566 0.0000150200 0.0000204352 -0.0000086724 0.0000325118 0.0002345116 -0.0001011731 -0.0002042813 -0.0000943491 0.0000654188 -0.0000071857 -0.0001945805 0.0000762624 0.0000599509 -0.0000356366 0.0000032236 0.0000814656 0.0021961978 -0.0008599402 -0.0006355892 0.0004120476 -0.0000431375 0.0000069763 0.0000170168 0.0000031444 0.0000021401 0.0000005854 0.0000030844 -0.0000602613 -0.0003901491 0.0002028857 -0.0000995712 -0.0000989710 -0.0000813378 0.0007618549 0.0043869297 -0.0021845227 0.0010248202 0.0011504834 0.0007266330 0.0000096925 0.0000433242 -0.0000213988 -0.0000257273 0.0000180668 -0.0000537621 -0.0000899649 -0.0004431868 0.0002247181 0.0003082249 -0.0001406146 0.0005850500 0.0000063980 -0.0000059005 -0.0000009399 0.0000135135 0.0000206958 0.0000323713 -0.0000992349 0.0000447363 0.0000156513 0.0000039383 0.0000246477 -0.0000385771 -0.0000321942 -0.0000560917 0.0000235194 -0.0000785821 0.0000490469 -0.0001287278 0.0005008135 0.0004461460 -0.0003527785 0.0000419943 0.0002032704 0.0001613477 -0.0000027355 -0.0000459108 -0.0000665262 0.0000221299 0.0003515675 -0.0002263063 0.0000073155 -0.0000460558 0.0000196687 -0.0000113598 -0.0000032835 0.0000019674 0.0000421673 0.0000065474 -0.0000074870 0.0000052102 -0.0000012459 0.0000095501 0.0000013422 0.0000016418 -0.0000015334 0.0000000864 -0.0000001735 0.0000008375 -0.0000007242 0.0000007136 -0.0000017232 0.0000005099 0.0000018041 -0.0000009399 -0.0000087463 0.0000033979 -0.0000097156 -0.0000185210 -0.0000102405 -0.0000094935 0.0000087042 -0.0000022071 0.0000244212 0.0000011526 0.0000026012 -0.0000101545 0.0000000067 -0.0000272843 -0.0000375801 -0.0001329770 -0.0002613327 0.0000519394 0.0000152071 -0.0000278406 -0.0000187256 -0.0000003663 0.0000019475 0.0000012257 -0.0000013845 -0.0000012671 0.0000015248 -0.0000315191 -0.0000074715 0.0000167158 0.0000052459 0.0000078354 -0.0000008336 -0.0000108787 -0.0000022399 0.0000062836 0.0000007833 -0.0000027978 -0.0000041053 0.0003369071 0.0000627064 -0.0001845655 -0.0000358494 -0.0000979493 -0.0000050600 0.0001315788 0.0000262654 -0.0000784363 0.0000166796 0.0000231513 -0.0000054836 -0.0000007014 0.0000087240 0.0000035770 -0.0000662899 -0.0000917159 0.0000025410 0.0000033761 0.0000090727 -0.0000005348 -0.0000077222 0.0000151954 0.0000052853 0.0000045303 0.0000042866 -0.0000014615 -0.0002305693 -0.0000124284 0.0001054936 0.0000134398 0.0000060307 -0.0000041220 0.0000004714 -0.0000009237 -0.0000010516 -0.0000453550 -0.0000680104 0.0000060524 0.0027205997 0.0001491205 -0.0012539372 -0.0001156950 -0.0001706100 -0.0000127320 -0.0000052968 0.0000008088 -0.0000013011 0.0000903120 -0.0001708252 -0.0000597408 0.0000339648 -0.0000098025 -0.0000098843 -0.0006918367 0.0002823356 0.0001459576 -0.0000002142 -0.0000001134 0.0000021323 0.0000007348 0.0000016812 0.0000008716 -0.0000107575 -0.0000069969 0.0000001400 0.0000108379 0.0000071827 0.0000006349 -0.0000075700 -0.0000095014 -0.0000006255 -0.0000026129 -0.0000054187 -0.0000095693 -0.0001234900 -0.0000919986 0.0000021612 -0.0000159249 -0.0000288554 0.0000130224 0.0000032361 -0.0000011852 -0.0000020879 -0.0000094166 0.0000004803 0.0000052600 -0.0000267178 0.0000861092 0.0001191583 0.0000692797 0.0000048513 0.0000253936 0.0000079294 0.0000186456 -0.0000187776 -0.0002806996 0.0000915260 -0.0002183645 0.0016531360 0.0004668322 -0.0003973932 0.0001755055 0.0006805252 0.0005158867 -0.0001587961 0.0001285313 0.0000262858 0.0002754150 0.0001070538 0.0001458644 0.0000962087 0.0001692219 -0.0002877785 -0.0000072092 0.0000178126 -0.0000151809 0.0001063858 0.0000010063 -0.0000434974 -0.0000091199 -0.0000042593 0.0000025220 -0.0000726793 0.0008701739 0.0008872604 0.0026012390 -0.0048013082 -0.0039181165 -0.0160164271 -0.0064647910 -0.0143573494 0.0025077307 0.0017900835 0.0033277396 0.0214138004 -0.0574714981 -0.0576764402 -0.0126810417 -0.0018947896 -0.0087346705 -0.0165656525 0.0512359741 0.0460809527 0.1766313287 0.0781057998 0.1646147400 -0.0001060852 -0.0009091375 -0.0013568746 -0.2407737145 0.6454309409 0.6519511051 0.1043057595 0.0402441614 0.1027878951 -0.0000050591 -0.0000075161 -0.0000159461 0.0000688596 0.0000165333 -0.0000573925 -0.0000028026 0.0000004104 0.0000070642 -0.0000088575 -0.0000319504 -0.0000948087 0.0000116112 0.0000045315 -0.0000053776 0.0000155596 0.0000587375 0.0001706613 -0.0007768983 -0.0001805131 0.0006510236 0.0000002375 -0.0000007380 -0.0000023672 0.0000999399 0.0003554349 0.0010702250 -0.0000896639 -0.0000251381 0.0000827559 0.0004440691 0.0002768112 0.0005571312 -0.0001776585 0.0002307893 0.0002452521 -0.0000004202 0.0000003553 0.0000003365 0.0000005150 0.0000004415 0.0000007414 0.0000062904 0.0000035963 0.0000040855 0.0000069211 0.0000011090 -0.0000007592 -0.0000018278 -0.0000172723 0.0000079633 -0.0000117751 -0.0000075162 0.0000045484 0.0000075726 0.0001662917 -0.0000626157 0.0001407625 0.0000576500 -0.0000421171 0.0000029147 0.0000655192 -0.0000263356 -0.0000137973 0.0000082902 -0.0000002438 -0.0000399855 -0.0007362317 0.0003046349 0.0001459692 -0.0000920675 0.0000132701 -0.0000009273 -0.0000026863 -0.0000007415 -0.0000000268 0.0000000054 0.0000003109 0.0000056142 0.0000368520 -0.0000194161 0.0000061585 0.0000057017 0.0000060783 -0.0000670083 -0.0004113284 0.0002088627 -0.0000633438 -0.0000688403 -0.0000418712 -0.0000003015 -0.0000008686 0.0000006793 -0.0000009320 -0.0000002881 -0.0000008105 0.0000009467 0.0000063230 -0.0000004799 0.0000060157 -0.0000024519 0.0000163250 -0.0000023850 0.0000022447 0.0000045744 -0.0000022198 -0.0000233897 -0.0000375418 0.0000356610 -0.0000163676 -0.0000055172 -0.0000052451 0.0000142812 -0.0000210396 0.0000061030 0.0000105547 0.0000001950 -0.0000013571 -0.0000088570 0.0000050197 -0.0000720587 -0.0000768411 0.0000283992 -0.0000047680 -0.0000516795 -0.0000462062 0.0000009819 0.0000012307 0.0000001647 0.0000005299 0.0000225720 -0.0000057557 -0.0000003718 -0.0000024449 0.0000011341 -0.0000016953 0.0000012219 -0.0000028779 -0.0000072799 -0.0000021690 0.0000024877 -0.0000441850 -0.0000155303 -0.0000540546 0.0000141541 0.0000019194 0.0000170004 -0.0000222600 -0.0001148520 0.0000502263 -0.0000431836 -0.0000091383 0.0000619079 0.0002185467 0.0011465314 -0.0006539252 0.0000155260 0.0000063046 0.0000142848 0.0000080160 0.0000034074 -0.0000012857 -0.0000090785 -0.0000003898 0.0000032707 0.0000156530 -0.0000057764 -0.0000115335 0.0000034454 0.0000014773 -0.0000029958 0.0000918000 0.0001165908 0.0000123452 0.0009559785 -0.0015167506 -0.0011350436 -0.0000831931 0.0001256364 0.0000977441 -0.0000058812 0.0000032540 0.0000066589 -0.0000587486 -0.0000156354 0.0000325995 0.0000430297 0.0000757047 0.0000026487 -0.0000393274 -0.0000093499 0.0000139114 0.0000019387 0.0000003880 -0.0000019456 0.0006720943 0.0001672497 -0.0003625514 -0.0004079404 -0.0008296088 -0.0000543700 0.0004939988 0.0001230681 -0.0002644988 0.0000101363 -0.0000129962 -0.0000156119 -0.0000879208 -0.0000973756 0.0000242309 0.0008450703 0.0010844457 0.0000419444 -0.0000015148 -0.0000018336 -0.0000050237 -0.0000009282 0.0000012500 0.0000008043 0.0000044581 0.0000130275 0.0000009174 0.0000185218 0.0000015592 -0.0000086634 0.0000037644 0.0000088950 -0.0000005371 0.0000159064 -0.0000017335 -0.0000068298 -0.0000616673 -0.0001112267 -0.0000011947 -0.0002185558 -0.0000233558 0.0001013083 -0.0000601696 -0.0001015002 0.0000150018 -0.0001717437 -0.0000015512 0.0000686417 0.0000013218 -0.0000060408 -0.0000049487 0.0000036476 -0.0000014010 -0.0000018071 -0.0000617805 -0.0000002341 0.0000167359 0.0008286069 0.0003305953 -0.0005888423 0.0000206308 0.0000327903 -0.0000287845 -0.0000040056 -0.0000000061 -0.0000161072 -0.0000047467 0.0000015395 0.0000008781 0.0000019687 -0.0000098170 0.0000002586 -0.0000266896 0.0000322322 0.0000639451 0.0000130306 0.0000043117 0.0000014247 0.0000005320 0.0000036236 -0.0000004628 -0.0000100389 0.0000068138 0.0000131314 0.0000130545 -0.0000035895 -0.0000100705 -0.0000510845 -0.0006199345 -0.0005329093 0.0002307405 0.0001705780 0.0001114507 0.0000889738 0.0001165472 -0.0003460060 -0.0000414795 0.0000690439 -0.0000142609 -0.0001070307 -0.0000227061 0.0000240483 -0.0000297292 -0.0000631533 -0.0000232046 -0.0000297800 0.0000393377 0.0000063327 -0.0000098944 -0.0000084577 -0.0000010190 -0.0000045919 -0.0000130366 0.0000073300 -0.0000043168 -0.0000158865 0.0000216124 -0.0001702325 0.0000110594 0.0000646451 0.0000159562 0.0000109112 0.0000118697 -0.0000051177 0.0000009318 -0.0000024520 -0.0000273989 0.0000698593 0.0000622615 0.0001074430 0.0000462443 0.0000987335 0.0000073637 -0.0000037044 -0.0000006590 0.0000368249 -0.0001004960 -0.0001018462 -0.0000258302 -0.0000058176 -0.0000204834 0.0002375539 -0.0007644903 -0.0006905624 -0.0011815026 -0.0005287052 -0.0010991405 -0.0000005785 -0.0000004782 0.0000002865 -0.0004225851 0.0011214440 0.0011405857 0.0002256251 0.0000893143 0.0002318937 0.0045573200 0.0068366099 0.0144662084 -0.0654502934 -0.0155249600 0.0551879437 -0.0003443006 -0.0012122913 -0.0040185837 0.0009321830 0.0020602814 0.0054757909 0.0008263365 0.0000546719 -0.0012656097 -0.0133272991 -0.0558267862 -0.1523924078 0.7390506561 0.1701004083 -0.6208114338 -0.0009253653 0.0000877770 0.0011019414 -0.0067211497 -0.0220093095 -0.0647478596 -0.0114746692 -0.0030283976 0.0107054043 0.0000009296 0.0000005844 0.0000002472 0.0000010330 0.0000000602 -0.0000009072 0.0002347200 0.0000625819 -0.0000775804 0.0000706339 -0.0002117821 -0.0007195129 0.0000000157 0.0000000868 0.0000005498 0.0000023557 -0.0000026735 0.0000005305 -0.0000000338 -0.0000020360 0.0000011911 -0.0000005220 -0.0000010193 0.0000008826 0.0000002175 0.0000210884 -0.0000037362 0.0000095619 0.0000066787 0.0000013158 0.0000034251 0.0000447432 -0.0000176983 -0.0000115020 0.0000053383 0.0000005295 -0.0000305318 -0.0005003570 0.0002091614 0.0001064795 -0.0000662370 0.0000092821 -0.0000057068 0.0000007017 -0.0000101662 -0.0000004006 -0.0000009832 -0.0000102902 0.0000132641 0.0000769472 -0.0000356644 0.0000105031 0.0000126086 0.0000066600 -0.0001490950 -0.0008399493 0.0004207468 -0.0001238832 -0.0001371783 -0.0000848897 -0.0000030314 -0.0000272742 0.0000162347 0.0000091804 -0.0000080191 0.0000219410 0.0000510044 0.0002603467 -0.0001418090 -0.0001292118 0.0000486454 -0.0002302487 -0.0000099095 0.0000589235 -0.0000431936 -0.0000071245 -0.0000781138 -0.0002230944 0.0000674196 -0.0001335112 0.0000495129 0.0000467890 -0.0004208489 0.0007443372 -0.0000819083 -0.0004103887 0.0002105416 -0.0020213260 0.0008941551 -0.0036340284 0.0016297955 0.0021238473 -0.0013993657 0.0009610896 0.0026354071 0.0024971723 0.0000930177 0.0000000821 0.0001025185 0.0001546263 0.0016859977 -0.0006501510 0.0000319365 -0.0001782438 0.0000621313 -0.0000030663 -0.0000017975 0.0000035879 0.0000347111 -0.0000295600 0.0000098472 -0.0000192018 0.0000030484 -0.0000320576 0.0000060641 -0.0000014324 0.0000063565 -0.0000000077 0.0000052675 -0.0000048951 0.0000028848 -0.0000026112 0.0000059142 -0.0000129346 -0.0000671837 0.0000428217 0.0000233098 -0.0000118419 0.0000374222 0.0000327018 0.0000311143 0.0000479320 -0.0000213369 0.0000027737 -0.0001097283 -0.0000167782 -0.0000078783 0.0000585100 -0.0000053373 0.0002117739 0.0001927459 0.0003286963 0.0008539654 -0.0002477218 -0.0000199522 0.0000609031 0.0000273026 -0.0000003669 -0.0000008180 -0.0000007356 0.0000094746 0.0000063814 -0.0000090557 0.0000816692 0.0000199576 -0.0000420106 -0.0000103323 -0.0000137317 0.0000027797 -0.0000002356 -0.0000030719 -0.0000006355 -0.0000037509 -0.0000005634 0.0000126494 -0.0008278517 -0.0001361804 0.0004571926 0.0000627786 0.0001689608 0.0000061695 -0.0000089912 0.0000018225 -0.0000061146 -0.0000554740 -0.0000749601 0.0000277756 0.0000096420 -0.0000019657 -0.0000272134 0.0001115932 0.0001282275 0.0000062288 -0.0000085806 -0.0000265631 0.0000021030 -0.0000297082 0.0000380467 0.0000175153 -0.0000125584 -0.0000163678 0.0000023210 0.0006123010 0.0000241498 -0.0002742465 0.0000761221 0.0001608200 -0.0000116396 -0.0000296608 -0.0000016822 0.0000122392 0.0001262717 0.0001996828 -0.0000312760 -0.0072011184 -0.0003468979 0.0031885394 -0.0009172836 -0.0015502256 0.0002167632 0.0003163750 0.0000067538 -0.0001354249 0.0002298707 -0.0004331599 -0.0001634876 -0.0001417139 0.0000386286 0.0000456128 0.0028531366 -0.0010883719 -0.0007577637 -0.0000042049 -0.0000013761 -0.0000014452 0.0000042355 0.0000084106 0.0000176983 -0.0000210723 -0.0000365501 -0.0000165369 0.0000283801 0.0000215900 0.0000009173 -0.0000135361 -0.0000192236 0.0000096056 -0.0000112768 0.0000353878 0.0000633869 0.0001708854 0.0000521432 0.0000189156 -0.0000052110 -0.0000084597 0.0000027617 -0.0000003763 0.0000046049 0.0000041501 -0.0000141599 -0.0000081431 0.0000012681 0.0001352515 -0.0004427493 -0.0006799261 -0.0000441715 -0.0000421560 -0.0000104433 0.0000593610 0.0001741833 -0.0001864437 -0.0004443197 0.0006800610 0.0000796352 -0.0012871456 -0.0003458642 0.0000445159 -0.0001919179 -0.0008280819 -0.0004916040 -0.0000812428 0.0000611190 0.0000189429 0.0001261447 0.0000536109 0.0000780928 0.0000579316 0.0000733671 -0.0002336665 -0.0000010343 0.0000750139 -0.0000572778 0.0001005378 0.0000044519 -0.0000391030 0.0000416032 -0.0000034319 0.0000638621 -0.0013311240 -0.0002035562 -0.0012361281 -0.0117895060 0.0270948664 0.0236761872 0.0546842388 0.0234231659 0.0503090375 0.0016114392 -0.0023050846 -0.0018926057 0.0054689856 -0.0155827007 -0.0158877333 -0.0041514114 -0.0010368581 -0.0034052476 0.0929752236 -0.2935654312 -0.2653129103 -0.6055943562 -0.2695457773 -0.5651528519 0.0006103632 0.0003616171 0.0005766044 -0.0646515910 0.1732642075 0.1755242024 0.0362857917 0.0140696275 0.0359652861 -0.0000115733 -0.0000210529 -0.0000487753 0.0001605233 0.0000380947 -0.0001350803 0.0000062153 0.0000045013 0.0000057159 0.0000084805 0.0000354898 0.0001096717 -0.0000181192 -0.0000057358 0.0000128903 0.0000411678 0.0001858107 0.0005168313 -0.0018097352 -0.0004175866 0.0015165624 0.0000031290 -0.0000004727 -0.0000037178 -0.0001102418 -0.0003996915 -0.0012210793 0.0001670858 0.0000580398 -0.0001571462 -0.0000430195 0.0000576919 0.0000879776 0.0000908618 -0.0004072254 -0.0004653527 0.0000002806 0.0000000148 0.0000014311 -0.0000012885 0.0000004826 0.0000025993 -0.0000038110 0.0000163475 -0.0000075936 -0.0000094650 0.0000018354 -0.0000000782 0.0000005262 -0.0000218480 0.0000097509 0.0000006354 0.0000056787 -0.0000015507 0.0000249127 0.0002261694 -0.0000942912 -0.0000200822 -0.0000145282 0.0000086561 -0.0000009388 -0.0000490849 0.0000194930 0.0000158227 -0.0000100793 0.0000014620 0.0000212235 0.0005551052 -0.0002231306 -0.0001768155 0.0001152017 -0.0000100827 0.0000006539 0.0000042961 -0.0000004285 0.0000003622 -0.0000000076 0.0000015882 -0.0000083082 -0.0000516536 0.0000277948 -0.0000139079 -0.0000136552 -0.0000106612 0.0001036335 0.0005725036 -0.0002860434 0.0001474918 0.0001617213 0.0001071779 0.0000009309 0.0000067437 -0.0000036571 -0.0000020521 0.0000023753 -0.0000044315 -0.0000131976 -0.0000639697 0.0000336964 0.0000293395 -0.0000131529 0.0000577457 -0.0000013974 -0.0000012386 -0.0000013129 0.0000015815 0.0000139701 0.0000173070 0.0000042960 -0.0000062553 -0.0000049263 0.0000018499 0.0000075641 -0.0000121264 -0.0000101168 -0.0000146234 -0.0000012622 0.0000082648 -0.0000103319 0.0000142190 0.0001149612 0.0000778414 -0.0000824813 0.0000305129 0.0001020462 0.0000620868 0.0000016544 0.0000014477 -0.0000002728 0.0000012748 0.0000065962 -0.0000084863 -0.0000003341 -0.0000012754 0.0000000916 0.0000009344 -0.0000015531 -0.0000030333 -0.0000161225 -0.0000072242 0.0000035138 -0.0000678517 -0.0000107260 -0.0000981227 0.0000204714 -0.0000000032 0.0000198330 -0.0000555060 -0.0001392976 0.0000635435 0.0000031178 -0.0000320071 -0.0001097758 0.0002892198 0.0011242102 -0.0006748428 0.0000063193 0.0000850632 0.0000642495 0.0000091826 0.0000173533 0.0000079608 0.0000118654 -0.0000178828 -0.0000203913 -0.0000046049 -0.0000081214 0.0000128627 0.0000013850 0.0000143810 0.0000087847 -0.0000278337 -0.0000735483 -0.0000091466 -0.0056019817 0.0089828834 0.0062780367 0.0004058642 -0.0007063062 -0.0005485228 -0.0000034303 -0.0000067446 -0.0000036928 0.0004476559 0.0001125452 -0.0002472861 -0.0000868687 -0.0001612270 -0.0000205675 0.0000169107 0.0000253516 0.0000044928 -0.0000154969 -0.0000077972 0.0000097740 -0.0048819373 -0.0012640293 0.0027367276 0.0007089885 0.0016172799 0.0000857505 -0.0002564505 -0.0000752309 0.0001398655 -0.0000183579 0.0000078468 0.0000191334 0.0000477326 0.0000433642 -0.0000227839 -0.0003510350 -0.0004502186 -0.0000256129 -0.0000006683 0.0000000082 0.0000026546 0.0000027884 -0.0000048873 -0.0000019663 0.0000021248 0.0000029636 -0.0000008779 -0.0000018305 -0.0000001483 0.0000009569 -0.0000056709 -0.0000080642 0.0000014160 0.0000049426 0.0000005865 -0.0000019380 -0.0000100047 -0.0000200003 0.0000054216 0.0000148453 -0.0000015168 -0.0000089676 0.0000539392 0.0000922746 -0.0000143783 -0.0000555866 0.0000030253 0.0000245615 -0.0000287398 0.0000610107 0.0000196942 0.0000022104 0.0000087014 -0.0000014086 0.0000173542 -0.0000782915 -0.0000022263 0.0002868821 0.0006348122 0.0013344918 0.0000008064 0.0000067590 0.0000137161 0.0000009520 -0.0000174804 -0.0000116771 0.0000060377 0.0000050554 0.0000011703 -0.0000015903 -0.0000011597 -0.0000010721 -0.0000052408 0.0000154741 0.0000296757 0.0000018069 0.0000035473 0.0000046368 -0.0000013343 -0.0000007230 0.0000021055 -0.0000054611 0.0000034509 0.0000056234 -0.0000008797 -0.0000054235 -0.0000039130 0.0000504376 -0.0002321617 -0.0003012081 -0.0000074099 0.0000088779 0.0000018998 0.0000229702 0.0000410729 -0.0000637527 -0.0000087067 0.0000121816 -0.0000001107 0.0000055315 -0.0000003628 -0.0000066465 -0.0000061195 -0.0000516465 -0.0000522174 -0.0000027052 0.0000063008 -0.0000031697 0.0000212239 0.0000140167 -0.0000017637 0.0000030167 0.0000099606 -0.0000147018 0.0000067114 0.0000403561 -0.0000249363 -0.0000244570 0.0000077401 0.0000113365 0.0000353829 0.0000089826 0.0000387041 -0.0000037995 -0.0000014684 -0.0000038478 -0.0000250751 0.0000658481 0.0000575188 0.0000873156 0.0000364515 0.0000785726 -0.0000001619 -0.0000056394 -0.0000067466 -0.0000147013 0.0000387635 0.0000383854 0.0000088105 0.0000006341 0.0000048553 0.0002218749 -0.0007503262 -0.0006507299 -0.0009531323 -0.0004341465 -0.0008877023 0.0000008737 0.0000006871 0.0000016479 0.0001617350 -0.0004378491 -0.0004438010 -0.0000705901 -0.0000274139 -0.0000716181 0.0001689650 0.0007962170 0.0023401543 -0.0037854651 -0.0007346030 0.0037051358 -0.0030404908 -0.0007890405 0.0022016011 -0.0080357798 -0.0271043539 -0.0799456566 0.0215867178 0.0068380472 -0.0148708984 -0.0017174517 -0.0082696976 -0.0232265436 0.0433567391 0.0096637630 -0.0368630221 0.0001137368 -0.0004222822 -0.0011771322 0.0866172943 0.3022021811 0.8992698551 -0.2081569468 -0.0571196700 0.1837847914 -0.0000005822 0.0000002752 -0.0000004568 0.0000004444 -0.0000004614 -0.0000008539 -0.0004707501 -0.0000138625 0.0005300234 0.0001134656 0.0000780591 0.0001046536 0.0000000966 0.0000008064 -0.0000005278 -0.0000009924 -0.0000017332 0.0000009390 -0.0000002105 -0.0000018762 0.0000003597 -0.0000007585 -0.0000006250 -0.0000001157 -0.0000006070 0.0000086853 -0.0000096780 0.0000135048 0.0000019724 -0.0000089871 -0.0000007509 -0.0000070216 0.0000031590 -0.0000029375 0.0000022650 -0.0000006352 0.0000167623 0.0000836256 -0.0000523597 0.0000447702 -0.0000317356 0.0000009780 -0.0000042022 0.0000027613 -0.0000065668 0.0000026635 0.0000101237 -0.0000080659 0.0000019406 0.0000056333 0.0000020174 -0.0000010730 0.0000013715 -0.0000029147 -0.0000129679 -0.0000426874 0.0000045265 -0.0000048714 -0.0000090587 -0.0000094764 -0.0000065595 -0.0000283472 0.0000142892 0.0000106081 -0.0000047602 0.0000205320 0.0000564827 0.0002648285 -0.0001382880 -0.0001234122 0.0000472770 -0.0002313571 0.0000002049 0.0000070517 -0.0000093339 -0.0000166232 0.0000131724 -0.0000138275 -0.0000065942 -0.0000072045 0.0000019248 0.0000077656 -0.0000782224 0.0001393225 -0.0000104075 -0.0000290604 0.0000010994 -0.0000308798 0.0000518356 -0.0000961722 0.0001095487 0.0001149474 -0.0000836187 0.0000244490 0.0003096393 0.0001847741 0.0000052824 -0.0000166703 0.0000005995 0.0000388571 0.0000072488 -0.0000030645 0.0000030475 0.0000100780 -0.0000035413 -0.0000037248 -0.0000004631 0.0000018860 0.0000224218 0.0000077544 -0.0000027682 0.0000168204 -0.0000069510 0.0000342348 -0.0000067002 -0.0000082822 -0.0000043810 0.0000018407 -0.0000018725 0.0000003200 -0.0000034229 -0.0000017987 -0.0000056519 -0.0000046870 0.0000719717 -0.0000516963 -0.0000301971 0.0000306516 -0.0000302162 -0.0000244880 0.0000104281 -0.0000134306 0.0000352746 -0.0000460797 0.0000566152 0.0000090520 0.0000562831 -0.0000698800 -0.0001503438 0.0000374232 -0.0000814260 -0.5418502784 -0.8332303109 0.0763127125 -0.0002361910 0.0008212661 0.0005026146 -0.0000375724 -0.0001856073 -0.0000318360 -0.0000031821 0.0008711400 0.0006646643 0.0000507693 0.0004465366 0.0000685937 0.0000111641 0.0002039647 0.0000489873 -0.0000244560 -0.0008906503 -0.0002862261 -0.0002971791 -0.0006383258 -0.0001582937 -0.0001073720 -0.0004007410 -0.0000573946 -0.0003516976 -0.0009395235 -0.0002318123 0.0017869704 0.0012018929 -0.0006282492 0.0399739189 0.0598430659 -0.0066567334 0.0004232582 0.0003699908 -0.0006713774 -0.0187221222 -0.0166951668 0.0050590054 0.0000600355 0.0005836371 0.0000845303 -0.0000683870 -0.0000246921 0.0000227249 0.0001415431 -0.0000411676 -0.0000734842 -0.0000578443 -0.0003554757 -0.0000022846 0.0001700212 0.0001016361 -0.0000699847 0.0000587895 0.0000987857 -0.0000237961 0.0005413196 0.0001076665 0.0000229274 -0.0070968113 0.0041587200 0.0050175158 -0.0004111674 -0.0003431227 0.0002212555 -0.0001712270 0.0000423882 0.0000845604 0.0002858709 -0.0000920714 -0.0001070710 -0.0006464984 0.0005104940 -0.0000420957 0.0157780004 0.0023875661 0.0021911263 -0.0000099529 -0.0000080642 0.0000038766 0.0002017378 0.0004573867 0.0014120614 -0.0001721639 -0.0015382451 -0.0009208384 0.0007163515 0.0005670289 0.0000713218 -0.0002613921 -0.0001690729 0.0000956547 0.0000712539 0.0000094784 -0.0000585429 0.0000537492 -0.0000883944 -0.0004165464 0.0000491314 0.0000552125 -0.0000474470 -0.0003330043 0.0002391787 0.0003479724 0.0000251971 -0.0002256578 -0.0001886335 -0.0002602650 0.0001849683 0.0006336852 0.0004433784 -0.0000629605 0.0001666565 -0.0001831413 0.0004217271 -0.0004734195 -0.0006181933 0.0011179109 0.0003920318 -0.0003739885 -0.0001848714 -0.0006760119 0.0024147185 0.0016449210 0.0053041432 -0.0000492146 -0.0001277854 0.0000873343 0.0002555567 0.0002904789 0.0002717300 -0.0000025076 -0.0001408246 -0.0006008166 0.0000183880 0.0007980476 -0.0001129244 -0.0007643922 0.0002185268 0.0004321367 0.0005238918 0.0003206280 0.0008607652 0.0000281265 0.0000038811 0.0000208430 -0.0000411192 -0.0000025009 -0.0000094344 0.0000839521 0.0000000404 0.0000765879 -0.0000152054 0.0000202929 0.0000174139 -0.0000108936 0.0000003177 -0.0000078286 0.0000074420 -0.0000054389 -0.0000076215 0.0001871986 -0.0001807126 -0.0001269819 -0.0003783641 0.0002614933 -0.0009681747 0.0000274010 0.0001023285 0.0001628786 -0.0000219571 -0.0000067657 -0.0000209226 -0.0001143689 -0.0000693902 -0.0001181932 0.0000148905 0.0000069754 0.0000074517 -0.0000196180 -0.0000096804 0.0000039604 0.0000072243 0.0000033410 0.0000128748 0.0000028294 0.0000048252 0.0000034836 -0.0000049052 -0.0000013131 -0.0000003240 -0.0000837650 -0.0000364801 -0.0001167036 0.0000820326 0.0001259596 -0.0000983550 -0.0000419871 0.0000164746 0.0000632208 0.0000121218 -0.0000651426 -0.0000632002 0.0000813224 -0.0000136409 -0.0000625346 0.0000289432 -0.0000405952 -0.0000820623 -0.0000462352 -0.0000700558 -0.0000552550 0.0000042175 -0.0000107029 -0.0000373073 0.0000324852 -0.0000070276 -0.0000259035 -0.0000029628 -0.0000011071 0.0000002504 -0.0000030644 0.0000035410 -0.0000030309 0.0000020583 0.0000072457 -0.0000035890 0.0000010514 0.0000036439 -0.0000018942 0.0000128482 -0.0000413970 0.0000144195 -0.0000543198 -0.0000229801 0.0000173227 0.0000008848 -0.0000098245 0.0000029949 0.0000002651 -0.0000034080 0.0000003060 -0.0000054631 0.0000752151 -0.0000230268 -0.0000488749 0.0000249911 -0.0000021802 0.0000052555 0.0000041368 0.0000051829 -0.0000006241 0.0000017927 -0.0000020902 -0.0000026385 -0.0000049865 -0.0000017272 0.0000020821 0.0000010769 0.0000016783 0.0000187342 0.0000355286 0.0000086537 -0.0000172601 -0.0000227139 -0.0000084690 -0.0000010184 -0.0000053883 0.0000018240 0.0000026721 0.0000002965 0.0000024602 0.0000039829 0.0000662965 -0.0000336428 -0.0000293768 0.0000102280 -0.0000477657 0.0000580674 0.0001050628 -0.0000552010 -0.0006195335 -0.0007429299 -0.0008521727 -0.0003229701 0.0000132145 -0.0001106703 -0.0001090415 -0.0007876123 0.0008059077 -0.0000662777 0.0001791102 -0.0000718188 0.0004411785 -0.0004685829 0.0004532458 -0.0008405083 -0.0005690150 0.0001787526 0.0001730139 -0.0010549334 -0.0006926359</array>
                     <array dataType="xsd:integer" dictRef="x:serial" size="345">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="345">-231.72729941 14.01144669 23.46353162 28.77576241 30.88453701 32.56890465 37.23415747 38.35585109 41.81386679 50.80878119 53.39000080 55.55746347 61.94875710 65.88351921 67.07446865 70.92479114 75.76212950 76.47967084 78.64690933 86.30283237 88.75570776 92.07097733 94.80267936 97.93130116 98.93633112 105.05289593 110.21462463 117.71632886 123.18399801 129.60354181 133.17564022 140.71172170 146.67760043 151.50995046 166.92151918 168.75142214 173.26513427 178.16704694 181.24416127 183.80705603 186.64774737 199.68353848 200.93757898 202.85624715 209.90700072 215.13646401 221.83064214 224.05651973 225.27497419 231.77838197 233.38128446 248.77451227 250.41827761 253.65503622 259.60308425 267.17085664 271.40420651 274.69284228 281.91624592 287.31202695 290.43387448 299.55734856 317.65973025 326.44790673 336.10099159 337.50923619 340.93267952 344.59512212 353.92902031 360.83799311 367.82775777 384.92424483 399.01074876 404.53715421 410.85036469 424.33665876 425.79454819 427.62092142 439.45440853 449.62950943 451.48161325 454.53408737 460.31451530 468.89284978 473.71794374 480.93985278 490.48690069 493.31196272 503.77838080 511.99138034 517.65181755 536.62608811 544.41325481 546.86171938 552.84791017 560.87509404 567.31807725 575.23819966 579.91293273 581.24346001 583.89576858 585.37216469 590.87577397 600.73276844 606.73415578 610.80712050 623.56451673 636.19207217 638.21326135 640.89409587 648.66433370 650.86068428 659.57119842 660.29323980 680.47358165 687.34672005 705.36602830 711.57298094 711.80875106 715.65979590 716.26843575 729.37455030 730.01204673 736.58867678 745.80846004 753.61014853 756.19547074 771.76346677 775.62380913 780.19881009 783.37187276 785.24530168 787.10170933 787.37694297 792.42869829 803.26601059 803.29379411 805.54812948 808.48137633 814.26627193 834.11419994 846.89727666 850.47531075 858.51053664 861.45088231 866.56047867 870.83233104 873.29001078 874.93001857 876.32410381 882.90997281 885.74085643 888.17586993 894.63811690 898.84689302 899.43110408 900.88606402 903.56587149 905.59823963 906.85174872 909.23060197 918.02356302 946.97450606 949.62927152 957.64849730 964.65928039 976.29458292 979.94600416 994.87093735 1002.43732283 1004.68015487 1006.31137351 1007.90923474 1008.64540312 1011.05690454 1014.01508012 1015.49558349 1017.22468245 1018.59277534 1023.87391581 1026.13384952 1032.05241240 1032.15657562 1034.93023129 1037.80309044 1041.68774899 1051.18273039 1053.54833355 1070.77158670 1071.49176360 1075.46861401 1076.86802181 1087.35181810 1113.34318835 1115.32661574 1124.26755883 1126.67892110 1132.74523646 1135.37494254 1136.37390267 1156.02222221 1162.22450320 1166.45398838 1175.54186367 1180.21028625 1181.78924103 1188.05352862 1188.34824725 1189.10565316 1211.41638970 1214.28579013 1214.60925573 1218.72276117 1226.03943757 1228.46622018 1231.34154179 1253.89524071 1256.24797132 1269.28993709 1287.38792312 1290.26476073 1292.01967935 1301.90644961 1305.35311648 1307.13254332 1309.13217078 1310.59826859 1314.24670588 1323.20367809 1324.28381619 1327.24196199 1333.84079260 1345.41848679 1349.27283553 1364.54054493 1372.61581842 1377.24745582 1380.24014222 1383.88982497 1385.73323200 1398.00940986 1415.72566548 1430.76483004 1431.83645708 1434.65112761 1437.80455980 1439.93859446 1440.91586297 1442.51176841 1444.16354586 1451.00585281 1454.87038088 1458.37023869 1461.25379799 1462.14055107 1464.52706152 1466.11095777 1473.66245175 1482.97265603 1483.46961230 1484.48030067 1489.45460430 1490.12533786 1493.84441096 1496.41831279 1500.02886524 1501.68937310 1505.86679987 1510.05264490 1514.37428092 1527.28594068 1535.10979759 1538.80131041 1555.99912710 1559.24721851 1562.56512561 1569.99308340 1577.91400495 1583.94871390 1613.87262395 1662.82893356 1663.84039994 1668.62970686 1670.03750262 1675.38866701 1680.69317557 1686.90051397 1691.74527756 1700.13972569 1701.14104488 1704.12893154 1704.79296109 1712.40916058 1723.70309681 1728.77289849 1740.52260596 1746.31349273 2827.33673452 3025.85042177 3026.32038206 3028.70817559 3038.50336830 3052.88482400 3058.53796144 3105.82877749 3120.75898889 3124.40247436 3126.96542862 3132.39169985 3146.43352928 3154.17343320 3155.93943595 3158.68780134 3162.30453169 3165.28886085 3188.80292794 3189.76610658 3192.76435229 3192.91990318 3194.59303217 3199.02431068 3201.02191866 3201.75032853 3204.69077192 3208.02036310 3208.56649825 3209.48744388 3210.73366492 3215.29076974 3216.05652449 3216.11015576 3222.68652102 3225.19265701 3226.64940235 3230.38631144 3231.75213718 3233.48444560 3234.49273494 3236.35644068 3238.60850542 3250.03652547 3251.35234597 3252.05920583 3257.13355019 3528.99062295</array>
                     <array dataType="xsd:double" dictRef="cc:redmass" size="345">8.24398160 6.54813474 6.86559405 6.68540727 7.43628115 5.24480032 5.66822807 5.98109908 6.55590213 6.97701461 9.16029515 6.19143225 6.29108186 5.75683511 5.49234124 5.68067934 5.43704596 5.59834172 5.37068550 4.42692800 4.94188941 5.58224570 4.32519004 4.40702836 4.23354771 5.75479876 6.17588740 3.11821727 4.90246937 5.60125013 5.70107449 6.03405462 5.80476217 7.21396616 5.23664153 1.19427064 2.91333053 2.04606368 3.41380396 6.78825955 2.49038863 5.76015896 3.04312570 1.84803810 1.92105836 3.34114271 2.13532899 3.56903290 5.90715858 2.39614596 2.42240510 2.43940227 6.00183818 3.36576273 3.27836500 3.26438081 5.53317858 1.45133720 2.36440094 6.04667299 5.21269349 3.39713410 5.45425246 5.10166606 4.07693549 5.06193988 3.29352966 5.38569373 1.44726032 5.32218461 6.04489277 5.77374111 2.09984501 3.26072264 4.36383810 2.85082231 2.98944437 3.06308974 5.78393539 7.96566475 4.95459939 8.23493331 7.86149776 3.94769515 4.20513892 4.93333068 6.58782168 5.06949221 5.52193664 5.60335652 4.66860662 4.98355338 3.05905344 4.22454995 5.32909948 4.94098867 5.20754957 5.06883369 4.52757473 4.31032665 4.30826298 4.67362408 5.35044599 6.68214542 6.27229006 3.85591776 5.47598795 6.36545376 6.65973768 6.80972066 7.04042915 3.50299134 5.28670697 5.34451385 5.72766009 5.93404615 2.07894228 2.21246704 4.31080865 1.97831681 2.30807763 2.95252435 3.74700713 3.34067716 1.65141522 1.79404716 5.92605680 2.59632902 3.84946431 1.36699337 1.67742932 1.47267027 1.82880647 2.83989139 3.67107022 2.03210366 3.42268054 2.06325082 4.81401651 4.25613530 5.05853648 3.88333112 4.00587996 1.30875236 1.29362304 4.55771463 4.08392880 2.96718013 1.97427893 1.37894330 1.77579692 2.02086861 2.98693907 2.15850633 1.78190979 1.77794242 2.52766762 1.61055006 2.42257734 2.96834102 6.49465811 5.32939626 1.67165737 1.65976668 1.39756124 1.36085537 6.72143855 1.33898398 1.64530701 1.45528661 1.63090931 1.88633607 1.43637693 1.43105942 1.35588987 1.51470602 1.45101343 1.35158712 1.43386571 4.27661377 1.42412406 1.39994530 1.32331591 2.75406296 1.44835010 2.48098336 1.34737141 2.82175562 2.01975655 2.12878081 1.88103036 2.06770960 2.75999618 1.56578842 3.39050922 10.95663189 1.52316617 1.23828429 1.26368514 1.72228007 2.37834749 2.06340005 1.49514661 1.25793867 1.09762319 1.26349291 1.10584042 1.54469774 1.26703626 1.45538314 1.39873417 1.52400218 1.98519826 1.14987876 1.64324454 1.69348764 2.42605238 1.72582491 2.02287129 3.44556583 4.05141834 2.63814708 2.02529944 1.59256850 1.76314107 2.09843302 1.32055649 2.87633696 1.45448951 2.26164873 1.48722427 2.56495420 2.35130144 2.43775274 2.30518318 3.02176688 1.40491229 5.61034464 4.09060343 4.61673408 4.57220977 1.41790688 1.27262049 3.32231563 1.40045216 5.10944902 4.83234483 1.26260275 1.56552166 1.07773195 1.18087773 1.07941576 2.51375414 2.21080310 1.40875743 1.78889201 3.02911767 1.08384063 1.10100875 7.91884883 1.04587834 6.12511574 1.17364977 3.93385537 1.07473224 1.07945808 3.54968250 3.31389202 2.34294632 4.00878646 1.09517287 2.78415444 2.24512775 2.28863193 2.99313170 3.09558418 4.07910237 4.35006048 2.58829204 4.00823544 8.56612132 8.05565688 5.62622820 8.12862489 8.46809972 5.86228364 6.71722469 6.94525579 5.74294318 5.97572234 6.55671055 6.79497719 6.28789118 6.94180568 7.32664837 12.31390679 12.55991696 1.07970147 1.04207467 1.03721558 1.03758629 1.04470994 1.03649057 1.03251874 1.09853710 1.10125752 1.09646373 1.10217218 1.10385457 1.10490943 1.10489791 1.10143708 1.10963107 1.10418747 1.10365999 1.08788684 1.08757578 1.09201046 1.09256894 1.10865001 1.08665505 1.09045460 1.09146598 1.08699117 1.09198544 1.09069298 1.09135798 1.09174007 1.09613757 1.09376918 1.09760590 1.09757560 1.09486525 1.09701623 1.09692007 1.09366099 1.09177590 1.09787086 1.09480203 1.09192718 1.09471631 1.09474276 1.09659782 1.09554380 1.07584717</array>
                     <array dataType="xsd:double" dictRef="cc:displacement" size="121095">-0.0000167094 -0.0005467377 0.0008002297 -0.0004689082 -0.0018468847 -0.0032072812 -0.0002606236 -0.0009024545 -0.0007131828 0.0002984028 -0.0000945920 0.0020067363 -0.0000474591 0.0006686257 0.0043088731 -0.0003027160 -0.0009173518 0.0041868525 0.0003322714 -0.0001520165 0.0028718595 0.0016233376 -0.0019541763 0.0028421039 0.0010505175 -0.0019152170 0.0034840146 0.0041278255 -0.0031870125 0.0019818126 0.0000543312 -0.0033218090 0.0083261134 0.0019492225 0.0014804914 0.0104022616 -0.0000005125 0.0013689911 -0.0043062803 0.0072891958 0.0130403777 0.0192730258 0.0259773304 0.0025038408 0.0014622058 -0.0056074218 -0.0381213631 0.1417429563 -0.0062156285 0.0042493861 -0.0259786255 -0.0088189997 -0.0041065384 -0.0164130409 -0.0061282697 0.0020247761 0.0388978407 -0.0241992826 0.0124220288 -0.0118383741 0.0041288710 -0.0004642925 -0.0110961053 0.0085696986 -0.0007797213 0.0117155322 -0.0216712120 -0.0052104706 -0.0017988448 -0.0316185402 0.0239341109 -0.0229386093 -0.0033287063 0.0020019374 -0.0135619982 0.0199567009 -0.0164289086 0.0264626667 0.0266413224 -0.0476121625 0.0989286560 0.1566852851 -0.2264013428 0.3979253499 -0.0818801629 0.0031227934 -0.0335533786 0.0239514537 -0.0870183175 0.1157908957 -0.0023148835 -0.0078510184 -0.0305491217 -0.0065126899 -0.0218394626 0.0308210184 0.0048349714 -0.0851729571 0.0521416367 -0.0005626718 -0.0504377571 -0.0178800766 -0.0130871710 -0.0007122584 -0.0252488881 -0.0322081301 -0.0070599398 0.0444914947 0.0113992828 -0.0988742414 0.0659792185 0.0078750413 -0.0603445370 -0.0614759141 -0.0336575872 0.0176646221 -0.0716415193 0.0000938377 0.0071407459 -0.0700441448 -0.0179005523 0.0097177039 0.0051950543 -0.0472302356 0.0043599441 -0.0324674904 0.0003280678 -0.0004062721 0.0013375644 -0.1560490570 0.2495674372 -0.4465732196 -0.0276409140 0.1052520905 -0.0663088157 -0.0045597628 -0.0416259705 0.0326034431 0.0576247741 0.0192989671 -0.0168167991 -0.0065158427 -0.0136509780 -0.0077510261 -0.0125391197 -0.0076332513 -0.0195529063 -0.0119944981 -0.0064914866 -0.0025172807 0.0441818665 -0.0109454140 -0.0215349433 -0.0073032385 -0.0108294640 0.0256398527 -0.0177147476 -0.0131908281 -0.0123728058 0.0022279761 -0.0265231495 -0.0167350435 -0.0083430005 -0.0004611162 0.0002778605 0.0005106806 -0.0001526828 -0.0174484916 -0.0068913854 -0.0258216753 -0.0285466351 -0.0243330363 -0.0146888572 -0.0106718706 -0.0116760717 -0.0087807613 -0.0103844382 -0.0169339322 0.0022843794 0.0091571400 -0.0119794144 -0.0134944110 -0.0061266928 -0.0305156974 -0.0203249875 0.0113776623 -0.0106232050 -0.0644428515 0.0124391879 0.0007605250 -0.0267565695 0.0134234712 -0.0005343526 -0.0014252521 -0.0004110793 -0.0016403988 -0.0044573925 0.0018914805 -0.0028578046 -0.0051099667 0.0019002851 -0.0009479726 -0.0019674178 -0.0007516868 -0.0000235542 0.0006503220 -0.0021475780 -0.0001773185 0.0003336811 -0.0013391905 -0.0047641114 -0.0096391768 0.0063467516 -0.0049638496 -0.0136516954 0.0077431332 -0.0013970052 0.0007350016 -0.0011554228 0.0011092605 0.0061168306 -0.0070528637 0.0021750493 0.0042761687 -0.0050057437 -0.0015408350 0.0019445824 0.0006449229 -0.0038845159 0.0073454109 -0.0009892410 -0.0038057517 0.0069646062 -0.0013854575 -0.0041338004 0.0057262740 -0.0003188558 -0.0016728952 0.0023586694 0.0012176007 0.0030915263 -0.0038854872 0.0026595101 -0.0046876240 0.0060163812 -0.0019094746 -0.0029981898 0.0015496545 0.0007304193 -0.0092777735 0.0130832625 -0.0021580213 -0.0030329434 0.0036322535 0.0001917715 0.0004075054 -0.0048877916 0.0051100947 0.0009761604 0.0087842195 -0.0036882155 0.0013512772 -0.0093010227 0.0097860007 -0.0018691313 0.0044057997 0.0035905726 -0.0001454402 -0.0006490239 0.0000404479 -0.0000112166 -0.0006120731 0.0004398668 -0.0002141466 -0.0005979113 -0.0001367858 -0.0000368302 -0.0003302499 0.0000499159 -0.0004789094 -0.0009196346 -0.0009644972 -0.0001678594 -0.0004422480 -0.0004878864 0.0001306392 -0.0003816580 0.0002086715 0.0000934564 -0.0002777984 0.0001736682 0.0001445984 -0.0005881941 -0.0002369481 0.0000590934 -0.0003921549 -0.0002927706 0.0004937487 -0.0003823213 0.0021853685 0.0007328872 -0.0005349500 0.0024987587 0.0008111481 -0.0002527621 0.0016899472 0.0010664513 0.0002603024 0.0016702845 0.0017230208 -0.0011510119 0.0000854548 0.0023405077 -0.0001654732 0.0006454095 0.0013505802 0.0000437955 0.0021419915 0.0012431474 0.0003397641 0.0019785769 0.0030723697 -0.0007229275 0.0015196069 0.0026127742 -0.0000645067 0.0012128308 -0.0144398943 0.1063345951 -0.1109337300 -0.0336043542 -0.0084879471 -0.0158778151 -0.0621015698 -0.0062450617 -0.0580670514 0.2234590628 0.2705204663 -0.0402037536 -0.0659499963 0.0911192189 -0.0800232083 -0.3053665442 0.1327587630 0.0998659717 0.0864471066 -0.0131018816 -0.0386390200 -0.0060534755 0.0424192692 -0.0235478253 0.0153836142 -0.0017492218 0.0308805892 -0.0014283159 -0.0037923414 -0.0040346467 0.0075662814 -0.0035936448 -0.0022302310 0.0323441720 -0.0060796248 -0.0038123437 0.0267201615 -0.0017770317 0.0308808898 0.0338703992 -0.0046300837 0.0063433160 0.0498952174 -0.0117853788 -0.0102048192 0.0804741639 -0.0240010130 -0.0170345502 0.0493819437 -0.0096805747 0.0045385827 0.0910968358 -0.0277734759 -0.0189994775 0.0044793168 0.0051344108 0.0252974780 0.0327188272 -0.0003460774 0.0585418763 0.0110466774 0.0116666143 0.0580505246 0.0196990772 0.0095539295 0.0673155432 -0.0041230835 0.0264161896 0.0649561814 -0.0336905151 0.0089020288 -0.0249588893 0.0615674704 0.0015103689 0.0477955052 0.0426904883 0.0022595501 0.0305992386 -0.0064325398 0.0039081851 -0.0138278321 0.0375064240 0.0040599431 0.0426321143 0.0247351181 0.0008967135 -0.0036587860 -0.0006153900 0.0022724421 -0.0262358090 0.0134452991 0.0049632962 0.0210801176 0.0515557450 0.0044618101 0.0698877199 0.0298417722 -0.0008769061 -0.0125681556 -0.0160716353 0.0023666950 -0.0531987076 -0.0301146213 0.0056291121 -0.0312613465 -0.0415094781 0.0021595290 -0.0443942368 -0.0373851796 -0.0005500095 -0.0520835649 -0.0519350153 0.0017405643 -0.0559043373 -0.0686824901 0.0014289727 -0.0785419653 -0.0643522398 0.0019374743 -0.0853140005 -0.0473632602 0.0011589478 -0.0369860224 -0.0553913607 0.0010000608 -0.0478472936 -0.0728719351 0.0020083139 -0.0971066467 -0.0671793914 0.0021991574 -0.0991663021 -0.0357550214 0.0006733027 -0.0117486250 -0.0493590548 -0.0002092137 -0.0307624296 -0.0825810161 0.0024620434 -0.1205416639 -0.0750442646 0.0012299869 -0.0870663971 0.0062521621 0.0059235184 0.0338709189 0.0087892499 0.0127407481 0.0535133716 0.0345786248 0.0003549611 0.0223527857 -0.0588125265 0.0083430083 -0.0363249861 -0.0826348217 0.0095373575 -0.0374315098 -0.0923634093 0.0183631229 -0.0207436271 -0.0893835013 0.0119090967 0.0001498084 -0.1056141815 0.0148860807 0.0559945039 -0.0455052208 -0.0262637556 -0.0110641746 -0.1155479686 0.0439476201 -0.0308559037 -0.0972321151 0.0013185353 -0.0580085950 -0.1196963729 0.0006007239 -0.0587531814 -0.0676737166 0.0118924139 0.0654715968 -0.1193268353 0.0172563876 0.0951453976 -0.1394916036 0.0177473039 0.0420476326 -0.0301872965 -0.0182032734 -0.0379944819 -0.0388251041 -0.0425931034 0.0047713148 -0.0393113286 -0.0362007247 -0.0042021721 -0.1082029041 0.0413457316 -0.0679820225 -0.1154886882 0.0424358178 -0.0203486700 -0.1399788870 0.0691485600 -0.0250441515 -0.1126879601 0.0020189065 -0.0550823452 -0.1280183412 -0.0068910246 -0.0783303567 -0.1354634878 0.0052933943 -0.0444609210 0.0118511219 -0.0032689056 0.0525455780 0.0183763399 0.0236304252 0.0360073725 0.0190330224 0.0254018623 0.0414871840 0.0126501866 -0.0014601982 0.0652562476 0.0050781658 -0.0309123091 0.0872830934 0.0048243690 -0.0312663301 0.0806553395 0.0232076128 0.0433068794 0.0158605274 0.0240336096 0.0467618180 0.0259787565 0.0121847751 -0.0028284879 0.0649670622 -0.0003491988 -0.0526686938 0.1068474327 -0.0001408027 -0.0526805659 0.0941858893 0.0355657478 0.0248520008 0.0309224826 0.0237109783 0.0367439698 0.0436761656 0.0122585798 0.0222619038 0.0488098691 0.0105041669 -0.0013560644 0.0410440154 0.0213487520 -0.0110000216 0.0276215653 0.0468499729 0.0347126499 0.0266203600 0.0243100133 0.0555269469 0.0497514366 0.0029843886 0.0300735460 0.0619974723 0.0011142817 -0.0120101569 0.0456575023 0.0206880673 -0.0289523663 0.0212727589 0.0019648317 -0.0403366864 0.0877413281 0.0214263137 0.0324513190 0.0406773510 -0.0067139630 0.0143015202 0.0704960650 0.0061384523 0.0505801201 0.0637446397 0.0096872087 -0.0066324806 -0.0367012502 0.0215544620 -0.0080254497 -0.0387234250 -0.0008475819 -0.0094439148 -0.0729824027 -0.0003386459 -0.0138636616 -0.1109305028 -0.0099316319 -0.0082320323 -0.0707720081 -0.0087573836 -0.0162279125 -0.1391381510 0.0213013809 -0.0125065395 -0.0785130616 0.0104741199 -0.0154886203 -0.1137740781 0.0295567145 -0.0137556504 -0.0810830780 0.0100255924 -0.0191782984 -0.1442974524 0.0872953072 -0.0282957441 -0.0328658704 0.1020540499 -0.0341447453 -0.0377001777 0.1136532495 -0.0402720694 -0.0508068992 0.1524169135 -0.0572970813 -0.0746822468 0.1036781520 -0.0361029854 -0.0458179959 0.1727444500 -0.0665073853 -0.0886074471 0.1411334297 -0.0512753533 -0.0624883901 0.1662301245 -0.0629771054 -0.0812148904 0.1517846082 -0.0554229847 -0.0663330105 0.1968835504 -0.0766172639 -0.1005115277 -0.0538353593 -0.0004975192 -0.0542746546 -0.0320448245 -0.0032151571 -0.0534161911 -0.0601012487 -0.0076632901 -0.0735683199 -0.0648928958 0.0033110532 -0.0495068950 -0.0467343887 0.0170579195 -0.0124294030 -0.0594312441 0.0228085903 -0.0016512085 -0.0422523519 0.0200187486 -0.0033506811 -0.0293234424 0.0145706840 -0.0125767679 -0.0065877750 -0.0068330948 0.0423529890 -0.0209221485 0.0235485759 0.0839149423 -0.0100546420 0.0181471567 0.0717416746 0.0140779115 -0.0007920654 0.0318833286 0.0056589181 -0.0126348298 0.0306448838 0.0427363822 -0.0204396025 -0.0124564796 0.0302022367 -0.0175964277 0.0063424997 0.0756650149 -0.0654358396 -0.0529318663 0.0619996058 -0.0415060977 -0.0390530839 0.0898705044 -0.0820213473 -0.0744000121 0.0342714943 -0.0064246877 -0.0047352512 0.0090751087 -0.0267547339 0.0206609540 0.0161824811 -0.0345410847 0.0252370548 0.0416975669 -0.0583732772 0.0410942362 -0.0180013797 -0.0324523072 0.0317987868 -0.0579999773 0.0252337402 0.0194719676 -0.0730286273 -0.0102646177 0.0645677173 -0.0701184753 -0.0012027718 0.0542903989 -0.0635294780 0.0203626048 0.0304104242 -0.0471119602 -0.0127351049 0.0683388719 -0.0884033759 0.0207213611 0.0290617378 -0.0859977460 0.0320752860 0.0159271161 -0.0426465143 -0.0021594955 0.0572367878 -0.0317991578 -0.0305775333 0.0897973648 -0.1036338211 0.0280786838 0.0203604617 -0.1031073882 0.0505992018 -0.0059781845 -0.0599354678 0.0274829476 0.0232189948 -0.0464831000 0.0299654543 0.0400580809 -0.0476635228 0.0295827661 0.0543728150 -0.0423988787 0.0337561802 0.0368852624 -0.0303915027 0.0419127653 0.0319760745 -0.0281410786 0.0365284022 0.0703929943 -0.0523878990 0.0353358446 -0.0016175691 -0.0460530264 0.0393432703 -0.0044147310 -0.0218535771 0.0404414482 0.0684573460 -0.0219991564 0.0357115938 0.0987360188 -0.0676831145 0.0350453565 -0.0350627391 -0.0528976392 0.0389699645 -0.0372125071 -0.0106766489 0.0423434236 0.0955567700 -0.0261783357 0.0446106000 0.0302800048 -0.0198291685 -0.0120703887 0.0724185778 -0.0196658612 -0.0248317941 0.0623738529 0.0581261144 -0.0325673891 -0.0468838704 -0.0150504596 0.0410582462 0.0259647356 -0.0104810469 0.0409354515 0.0278135034 -0.0151083309 0.0470326284 0.0201576480 -0.0132582381 0.0437712142 -0.0405422388 -0.0161158630 0.0571452257 0.0123341727 -0.0327425953 -0.0360167283 -0.0805418645 0.0106726910 0.1142567010 -0.1081409824 -0.0039129165 0.0337830227 0.0412127716 -0.0017693864 0.0333958709 0.0426789708 -0.0107872555 0.0281258401 0.0330550698 -0.0172773626 0.0658699654 0.0039916100 -0.0215059956 0.0845077168 0.0300576174 -0.0330648035 -0.0394541267 -0.1144947629 -0.0337186533 -0.0387261560 -0.0957252103 -0.0355811306 -0.0682444340 -0.0524503498 0.0056542781 0.1022339982 -0.1364327394 0.0113093180 0.1190337259 -0.1539304151 0.0301609159 0.1673257860 -0.0801238795 -0.0133212735 0.0344852297 0.0411797386 0.0027189773 0.0280957637 0.0540934386 0.0075086396 0.0364482890 0.0340583008 -0.0141105425 -0.0253901341 0.0088186511 0.0168832872 -0.0436755016 -0.0145783767 0.0111275498 -0.0566625915 -0.0567004076 -0.0245228398 -0.0466014456 -0.0781453100 -0.0544053538 -0.0269261252 -0.0570854573 -0.0495817966 -0.0176877615 -0.0119927534 0.0431056751 -0.0489480882 0.0006267687 0.0335607441 -0.0743391706 -0.0724317787 -0.0322895395 -0.0571946890 -0.1206303755 -0.0827149110 -0.0192720833 -0.0754366511 -0.0740658624 -0.0025295169 0.0060593640 0.0470363891 -0.0126426923 -0.0536458256 0.0383565010 0.0065823936 -0.0602884469 0.0417822415 0.0036846765 -0.0597486211 0.0521885177 -0.0158668480 -0.0530062150 0.0607075570 -0.0330331905 -0.0465054983 0.0458437688 -0.0091609189 -0.0548563696 0.0296798257 0.0232375126 -0.0661060045 0.0347078358 0.0192989837 -0.0646825937 0.0546331325 -0.0174596477 -0.0528038732 0.0695348975 -0.0472263133 -0.0412789500 -0.0527901895 -0.0014262753 -0.1654124555 -0.0179762329 -0.1199213822 -0.1068986520 0.0261422000 0.0329655328 -0.0727562956 0.0382735113 0.0165120051 -0.0596959053 0.0003264363 0.0374491743 0.0830935772 0.0119613495 0.0257461613 0.0557811306 -0.0012631302 0.0679601726 0.1175258332 0.0096301270 0.0855605494 0.1225116775 -0.0114320944 0.0774341470 0.1401172147 0.0087350264 0.1091380046 0.1501896123 0.0231555077 0.0431831060 0.0563390577 0.0216823904 0.0723727506 0.0898439725 0.0340159384 0.0336047508 0.0314884319 0.0302255743 0.0853867101 0.0913313801 0.0409918979 -0.0418615784 -0.0031374530 0.0687849221 -0.0668070334 -0.0376178933 0.0275243512 -0.0452461116 0.0204864865 0.0451954011 -0.0720643674 0.0052273372 0.0036768993 -0.0261124933 0.0512793053 0.0347007793 -0.0737660799 0.0229537221 0.0868502431 -0.0942645055 -0.0533472937 0.0767324635 -0.0972357368 -0.0331414614 0.1088483263 -0.1135591180 -0.0817341131 0.0914503692 -0.1187587337 -0.0457789808 -0.0066550733 0.0339257020 0.0435363045 -0.0163170488 0.0351701517 0.0431535069 -0.0076847589 0.0273119039 0.0598290451 0.0120542660 0.0341333971 0.0402084440 -0.0184818299 0.0418574107 0.0117556865 -0.0105979685 0.0358126574 0.0042282105 -0.0222010450 0.0429601825 0.0099137060 -0.0242304371 0.0462447857 0.0066210398 0.0271225001 -0.0292776221 -0.0599900872 0.0263981055 -0.0648053913 -0.1399967353 0.0255257281 -0.0498198200 -0.1016887183 0.0256739619 -0.0078916009 -0.0050984750 0.0268820206 -0.0111892889 -0.0163070665 0.0257503262 0.0015626958 0.0347424837 0.0207687415 0.0100749084 0.0246908797 -0.0059832586 0.0454162135 0.0741837901 0.0211770315 0.0128850567 0.0512082129 -0.0152570479 0.0587348014 0.0923432688 0.0266542650 -0.0115990193 0.0310012984 0.0279648842 0.0002280651 0.0068947436 0.0215897897 -0.0175603724 0.0358768278 0.0370070575 -0.0110227120 0.0598192064 -0.0000610347 -0.0390176315 0.0329258132 -0.0585175316 0.0490862704 -0.0028840366 -0.0280890982 0.0158339351 0.0611018403 -0.0385586056 0.0266462008 0.0368273496 -0.0620225515 0.0511292651 -0.0150159857 -0.0162649920 0.0146838967 0.0622662328 -0.0728940494 0.0513556144 -0.0172414319 -0.0864518975 0.0648489503 -0.0462925749 -0.0262716277 0.0265954300 0.0373722333 0.0113421039 -0.0053299668 0.1065100226 -0.0875515699 0.0588700273 -0.0347350808 -0.1163782064 0.0855280155 -0.0898436340 -0.0652143192 0.0524264967 -0.0180312129 -0.0526935666 0.0409841484 -0.0015895937 -0.0609737429 0.0487182039 -0.0092090697 -0.0379792151 0.0369608847 0.0292007290 -0.0021324859 0.0309044035 0.0961988097 -0.0350217924 0.0396131025 0.0362398249 -0.0227357783 0.0309138981 0.0573360964 -0.0049274312 0.0281118202 0.0897096938 -0.0171901904 0.0367789053 0.0694608990 -0.0465075510 0.0442821238 0.0159542297 -0.0238630629 0.0292638400 0.0548067839 0.0079910527 0.0231062241 0.1084733240 -0.0150750360 0.0394630121 0.0746971059 0.0114610778 0.0286427085 0.1222670138 0.0001632578 0.0142167729 0.0664708313 0.0001710411 -0.0063543323 0.0617828753 0.0422653490 -0.0024543610 0.0271452072 -0.0285758682 0.0030121957 -0.0462661174 -0.0349330591 -0.0177809757 -0.0170255442 -0.0459913365 -0.0069569471 -0.0084195130 -0.0435340081 -0.0093745606 0.0174408810 -0.0630056707 -0.0172867430 0.0434137500 -0.0060362893 -0.0127760565 0.0205971196 -0.0678845609 -0.0060260313 0.0140352283 -0.0322888883 -0.0503606454 0.0004292331 -0.0383231979 -0.0748643212 0.0419205488 -0.0338969374 -0.0063236925 0.0413528291 -0.0725638615 -0.0260891589 0.0845474362 -0.0962676038 -0.0257850884 0.0214331862 0.0151372376 0.0018284277 0.0184570080 0.0016364391 -0.0345492743 0.0294108893 -0.0152160336 -0.0020772970 0.0138669556 -0.0642498102 -0.0068155526 -0.0024825268 -0.0692785252 -0.0055341658 0.0315078199 -0.0866277383 -0.0034563288 0.0110043029 -0.0483019817 -0.0509830990 0.0704067092 -0.0363611344 -0.0972017510 0.0487658891 -0.0341466103 -0.0969819878 0.0385620513 0.0260388997 -0.0295085541 -0.0526223929 0.0110931074 -0.0404849558 -0.0334832014 0.0067075488 -0.0504476632 -0.0117546713 0.0185624324 -0.0476492324 -0.0106742346 0.0333503241 -0.0351025535 -0.0316554642 0.0366649044 -0.0264630964 -0.0524092380 0.0033118796 -0.0430664571 -0.0329128937 -0.0047193063 -0.0619867889 0.0061282800 0.0177177669 -0.0597583146 0.0166542932 0.0426946065 -0.0330256396 -0.0302201172 0.0483508888 -0.0181552398 -0.0673593432 0.0051570354 0.0086215684 -0.0125952956 0.0169228039 0.0143427942 -0.0559887346 0.0657537587 0.0108209851 -0.0586256064 0.1063765682 -0.0060224340 -0.0171183426 0.0952585430 -0.0150536035 0.0267033479 -0.0359496533 0.0173771744 -0.0128746170 -0.0126726833 0.0250700154 -0.0887507070 0.0741485735 0.0280351709 -0.1085653292 0.1461679404 -0.0100670333 -0.0199068570 0.1267567093 -0.0262332600 0.0582672359 0.0330775858 -0.0540199621 0.0175676386 0.0019969568 -0.0745196325 0.0380500863 0.0970531467 0.0614741327 -0.1267020450 0.0579666804 0.0081158785 -0.1291327335 0.0228536067 -0.0531005392 -0.0922931099 0.0236301361 -0.0299639741 -0.0356810339 0.0195768100 -0.0801501919 -0.1374548154 0.0162915184 -0.0835442414 -0.1240035903 0.0197683582 -0.0986628357 -0.1833390873 0.0132977108 -0.1046861771 -0.1601825858 0.0204666787 -0.0331630686 -0.0173143606 0.0171028371 -0.0592390153 -0.0609208423 0.0201515118 -0.0157927494 0.0293098483 0.0146737893 -0.0615650902 -0.0472065359 0.0006838181 0.0408140706 0.0399758149 -0.0208142459 0.0630358600 0.0725621628 -0.0051186066 0.0559004636 0.0246130541 -0.0375476813 0.0944335077 0.0502331659 0.0144113462 0.0365508361 -0.0085914755 -0.0424363175 0.1051429601 0.0397408246 -0.0542334159 0.1034910335 0.0993469952 -0.0650087414 0.1195569046 0.0897420527 -0.0711714138 0.1218942335 0.1279760018 -0.0924109954 0.1505586623 0.1112480280 -0.0165852764 -0.0135649557 -0.0617441599 -0.0115652213 0.0045206039 -0.0758095020 -0.0217418003 -0.0273008641 -0.0482186007 -0.0060929103 -0.0294728611 -0.0752802663 -0.0237562241 0.0241806386 -0.0603507072 -0.0216042438 0.0082267039 -0.0681559887 -0.0282897433 0.0425366214 -0.0412398866 -0.0154034834 0.0391241795 -0.0823871106 0.0013932164 0.0089743225 0.0085103167 0.0117244887 -0.0086720759 -0.0115759877 0.0042230550 -0.0067951673 -0.0079148016 -0.0140337368 -0.0005755231 0.0013291463 -0.0084309367 0.0104040569 0.0101490231 -0.0260779025 0.0057353806 -0.0076926987 -0.0228831884 -0.0008036315 -0.0019071032 -0.0347269314 -0.0041899713 -0.0133015482 -0.0240869701 -0.0001563525 -0.0183602066 -0.0377328529 -0.0076891498 -0.0201712016 -0.0319943320 0.0181459924 -0.0018828532 -0.0104763860 0.0198773248 0.0179444812 -0.0248955479 0.0273756010 0.0171272454 -0.0201167734 0.0279289456 0.0241900963 -0.0344199883 0.0395012864 0.0227281788 -0.0054176005 -0.0423271418 0.0264158990 0.0242955478 -0.0482646933 0.0689809157 0.0211038883 -0.0499895117 0.0685061389 0.0106817639 -0.0535691380 0.0637803097 0.0009896372 -0.0389356548 0.0439148707 0.0363624338 -0.0630448754 0.0915707767 0.0315755371 -0.0652027904 0.0911394644 -0.0058714052 -0.0405295898 0.0395937506 -0.0118008619 -0.0284582519 0.0239686623 0.0509285326 -0.0706391548 0.1074805840 0.0447668096 -0.0750832622 0.1104227626 0.0035700760 -0.0461591791 0.0484658193 -0.0005216972 -0.0318828600 0.0437205386 0.0040764399 -0.0375323964 0.0584678404 -0.0134639410 -0.0201849481 -0.0009703497 -0.0392284867 0.0007643185 -0.0939397230 -0.0198784766 -0.0100238191 -0.0166625273 -0.0196228393 -0.0194476658 -0.0321082994 -0.0317566271 -0.0093698193 -0.0769779981 -0.0329760381 0.0002716127 -0.0634690293 -0.0153790371 -0.0103693674 0.0072742689 -0.0133895216 -0.0274307988 -0.0195996968 -0.0340347216 -0.0104698334 -0.0955625887 -0.0383149005 0.0075119107 -0.0761503318 -0.0489478990 0.0083629026 -0.1298562477 -0.0326902913 -0.0283837409 0.0111708209 -0.0320742743 -0.0041074230 0.0122815206 -0.0028199910 -0.0145245669 -0.0432751951 -0.0110971868 0.0312978208 0.0776008559 -0.0016928888 0.0622173422 0.0381941465 0.0034575939 0.0597595647 0.0077806915 0.0005080939 0.0686799396 -0.0184022877 0.0054043892 0.0839554391 0.0189326545 -0.0185596347 0.0161704891 -0.0446809982 0.0056097334 0.1159908996 -0.0637535197 0.0000756091 0.0953428157 0.0263935507 0.0029564460 0.1293669542 -0.0305095681 -0.0082062502 0.0499822135 0.0397969286 0.0110591564 0.0947553170 -0.0131595102 0.0178563558 0.1162094682 0.0486779457 -0.0248951790 0.0095589984 -0.0663997801 -0.0212358885 0.0193008205 -0.0582216540 -0.0185851858 -0.0120050337 -0.0207050858 0.0036101461 0.1075904334 -0.0890145032 0.0052377218 0.1201545107 -0.0887641372 0.0128259235 0.1528388893 -0.0457057036 0.0045686851 0.0973057265 -0.0713604767 0.0031436051 0.1509863064 -0.0322126243 0.0033662297 0.1658914189 -0.0316818933 0.0089854013 0.0250969641 0.0242393501 0.0044390464 0.0584430964 0.0159397712 0.0126444608 0.0780532101 0.0269601331 0.0235104097 0.0577419638 0.0501873728 0.0278128411 0.0216031162 0.0632527201 0.0211114546 0.0070658044 0.0485256774 -0.0070521336 0.0690796621 -0.0001587918 0.0083887108 0.1067080806 0.0179173974 0.0274302975 0.0674545611 0.0623339543 0.0365023613 0.0051891034 0.0828986268 0.0253666758 -0.0197104838 0.0551576516 -0.0294522002 -0.0133358046 -0.0741804342 0.0020378451 -0.0517180102 -0.0986254464 0.0611716128 -0.0893324353 -0.0914019242 0.0856895262 -0.0813025363 -0.0620495004 0.0530038583 -0.0420456901 -0.0383914874 -0.0733161812 0.0126721451 -0.0804662480 -0.0169383764 -0.0563682808 -0.1230193388 0.0971988348 -0.1401697735 -0.1152127954 0.1310586312 -0.1093189368 -0.0571793124 0.0738397701 -0.0384666542 -0.0146003189 0.0263453806 0.0117321165 0.1003013030 0.0310408405 0.1276042054 0.0325834557 0.1383615629 -0.1283559361 -0.1209172774 0.0833282518 -0.1891620675 -0.1292278683 -0.0029461413 -0.0203407134 -0.0189362620 -0.0120420384 -0.0162923000 -0.0103710577 -0.0014885236 -0.0386080226 -0.0380233602 -0.0094560674 -0.0521411461 -0.0470612735 0.0060742878 -0.0419478455 -0.0456467081 -0.0084955788 -0.0663778905 -0.0625212397 -0.0201025338 -0.0296591384 -0.0167054749 -0.0187421660 -0.0471397240 -0.0352108143 -0.0279398818 -0.0260149233 -0.0077022016 -0.0250192858 -0.0571523390 -0.0408559210 -0.0280781184 -0.0071880207 -0.0009232560 -0.0391211546 -0.0057734953 -0.0025618112 -0.0243398983 -0.0127293805 0.0022010519 -0.0351805490 -0.0150161648 0.0072407388 -0.0133336249 -0.0152909964 0.0005300335 -0.0324265546 -0.0193481054 0.0103921048 -0.0506817448 -0.0079117542 0.0030856508 -0.0497033344 -0.0120158378 0.0084343535 -0.0599634266 -0.0062051203 0.0027954537 -0.0588947651 -0.0134138223 0.0129899947 -0.0209781500 0.0489212340 0.1162930557 -0.0353164762 0.0227741490 0.1369910755 -0.0146062597 0.0639767483 0.1061401561 -0.0232271161 0.0751833489 0.1358736382 -0.0170546799 -0.0022837628 0.0967691677 -0.0262100706 0.0067973017 0.1076337851 -0.0033267076 -0.0248290561 0.0825991164 -0.0277974155 -0.0143206829 0.1138757417 -0.0478469782 -0.0162840966 0.0044668057 -0.0711615684 0.0110074792 0.0230175747 -0.0553904285 0.0060539118 0.0127792346 -0.0161943917 -0.0039554514 -0.0081274675 -0.0281685357 -0.0216895620 -0.0068589288 0.0177233718 -0.0204554516 -0.0006342537 0.0056521672 -0.0057750500 -0.0069701612 0.0484937719 -0.0129937597 0.0000489883 0.0394434001 -0.0239783610 0.0032504894 0.0633239575 -0.0147882306 0.0029219132 0.0096369221 -0.0366015604 0.0008382459 -0.0200772345 -0.0421152880 -0.0092382369 -0.0011300041 -0.0514396082 -0.0099477926 -0.0045045743 -0.0555418881 -0.0169649093 0.0072246163 -0.0589790895 -0.0141054325 0.0205520953 0.0074885139 -0.0140814170 -0.0442134225 -0.0655711608 0.0719070038 -0.0374892738 -0.0457454345 0.0501146459 -0.0175511050 0.0031920482 0.0013173815 -0.0191583641 -0.0528908179 0.0284745645 -0.0473365055 -0.0138282067 0.0449739731 -0.0382700559 0.0115655449 0.0187563276 -0.0088257942 -0.0287145544 0.0036538216 -0.0117521082 -0.0777324501 0.0315522420 -0.0608460970 -0.0088398883 0.0624531032 -0.0458740641 0.0372105952 0.0162318018 0.0006454253 0.0216930503 -0.0123674424 -0.0043181862 0.0460020034 -0.0167059748 -0.0285658356 0.0674829836 -0.0295909989 0.0209882204 0.0610726723 -0.0236415163 0.0588786618 0.0889628886 -0.0489008864 0.0045120238 0.0937561916 -0.0627210498 0.0594113878 0.0425772933 0.0063519745 0.0768883548 0.0565135275 -0.0074244508 0.0232974644 0.1072830040 -0.0746299029 -0.0240963343 0.1082612413 -0.0850063096 0.0775137786 0.0149292196 0.0428097455 0.1005561586 0.0453927112 0.0141113598 0.0099219662 0.1323558458 -0.1061873906 0.0740448957 0.1005549537 -0.0607648761 0.0104713330 -0.0343378336 -0.0149862427 0.0102220751 -0.0506212481 -0.0174416664 0.0460439519 -0.0347074379 0.0062276692 -0.0564485876 0.0238854862 -0.0246126888 -0.0284591777 0.0231955388 -0.0222947393 0.0026152118 -0.0162300212 -0.0078945310 0.0203853813 -0.0719999435 0.0573957968 -0.0245697329 -0.1258915996 -0.0052840586 0.0581923371 0.0054600088 0.0994918620 0.0405648586 -0.1552152756 0.1370818374 -0.0287704122 0.0656705588 -0.0423872760 0.0006936563 0.0732466225 -0.0519132350 -0.0301211430 -0.0841192934 -0.0352615677 -0.0178281369 -0.1672573911 0.0291566001 -0.0504833746 -0.1585565119 -0.0417465352 0.0725656004 0.0185252639 0.1281255718 0.0635033941 -0.0073296110 0.1171421206 0.0503652743 0.0431894840 0.0690000284 0.0713016018 -0.1159916193 0.1764487222 0.0563783882 -0.1942307940 0.1876058669 0.0078508004 -0.2128796997 0.1041022095 0.0406277796 0.0623482130 -0.0560802236 -0.0048952158 0.1106169136 -0.0692229696 -0.0121969026 0.0538251474 -0.0397895844 -0.0511816129 -0.0224789274 0.0122512886 -0.0774701835 -0.0518328500 0.0489056982 -0.0670916074 -0.0287761963 0.0479914512 -0.0320292409 0.0202021859 0.0122851541 -0.0088667662 0.0405911803 -0.0214466546 -0.0183823484 0.0193505775 -0.0221700349 -0.1010900582 -0.0831449763 0.0754481030 -0.0837031592 -0.0412373699 0.0717711153 -0.0169082060 0.0703721889 0.0027406949 0.0183724731 0.0791499729 -0.0493955412 0.0015980001 0.0405032495 -0.0504528259 0.0329321901 -0.0140053687 -0.0026070526 0.0329059106 -0.0109569753 -0.0080146944 0.0476164619 -0.0304739578 -0.0032058497 0.0618360141 -0.0530565664 0.0071890038 0.0613517823 -0.0551981717 0.0120919831 0.0221910746 0.0018455228 -0.0075299193 0.0222105464 0.0057021526 -0.0162871932 0.0482895719 -0.0286185509 -0.0095956535 0.0735662711 -0.0680556561 0.0110320555 0.0726428549 -0.0716237555 0.0195170421 0.0077443185 0.1096390341 -0.0167960456 -0.0299525962 0.0739753407 0.0136190568 0.0496739235 -0.0204465666 -0.0142116578 0.0480048622 -0.0365155758 -0.0093772587 -0.0438272160 0.0243777199 0.0074753029 -0.0239245109 0.0190081479 -0.0035933650 -0.0517819824 0.0491777394 0.0152766241 -0.0396137831 0.0675757904 0.0123684005 -0.0678997754 0.0532840686 0.0240746414 -0.0454875850 0.0863053897 0.0189398287 -0.0115917831 0.0383892187 -0.0071383578 -0.0193415264 0.0620508895 0.0007390681 0.0043549528 0.0347462508 -0.0151083454 -0.0094402285 0.0767165840 -0.0018255211 0.0150592156 0.0056234679 -0.0092690864 0.0384227133 0.0020359319 -0.0069286809 0.0021852023 0.0202048044 -0.0136324698 0.0141948370 0.0305973038 -0.0174186784 -0.0174719212 0.0233332153 -0.0139320656 0.0039895007 0.0418199107 -0.0211870204 0.0506666948 0.0131260951 -0.0111066988 0.0393987987 0.0268821234 -0.0165935565 0.0693441515 0.0101142216 -0.0097431006 0.0491487806 0.0348956697 -0.0199507228 -0.0922874654 0.0626052326 -0.0353559423 -0.1060956978 0.0626512902 -0.0344226354 -0.0766881172 0.0971926546 -0.0484517666 -0.1250400279 0.0594280537 -0.0316760835 -0.0656652767 -0.0207879333 -0.0015869101 -0.0886152490 -0.0312588884 0.0102184531 -0.0382508069 -0.0411393907 0.0019718466 -0.0807139292 -0.0223777823 0.0037691486 0.0244492986 0.0220083884 -0.0068260510 0.0443826925 0.0215373436 0.0282670967 0.0326886095 0.0177628009 0.0169637727 0.0011750726 0.0083314424 -0.0084339912 0.0087372987 0.0179372739 -0.0162771104 -0.0123447558 0.0118892654 -0.0092378861 -0.0075381284 0.0079427640 -0.0103884240 0.0036925199 -0.0047655480 -0.0253125013 -0.0067539825 0.0062149752 -0.0164969442 0.0096297580 -0.0104705599 -0.0322962070 -0.0208497485 0.0174256757 -0.0029423524 0.0019921620 0.0327306646 -0.0214538332 -0.0165044540 0.0213964705 0.0121306121 -0.0006548612 0.0408981236 0.0461089623 -0.0455228225 -0.0087852394 0.0075952862 -0.0359862851 -0.0612411584 -0.0368561481 -0.0610035371 -0.0969148095 0.0252426750 -0.0604841009 -0.0867673970 0.0116259044 -0.0587423772 -0.0626863621 -0.0207387393 -0.0477811415 -0.0916282945 0.0081736522 -0.0717692319 -0.0691644412 -0.0025553705 -0.0720759513 -0.0561299947 -0.0190787909 -0.0468178634 -0.0793494110 -0.0084822401 -0.0396575346 -0.1056563555 0.0171734503 -0.0798953211 -0.0657119865 0.0002858431 -0.0823042781 -0.0403931972 -0.0302530133 -0.0469267482 -0.0526623950 -0.0282190320 -0.0250762968 -0.0410354980 -0.0011015939 -0.0427303933 -0.0283587708 0.0141254729 0.0083830671 -0.0280407596 0.0076563804 0.0815001265 -0.0036421391 0.0400911869 0.0143454539 0.0013196889 0.0212524724 0.0402602287 -0.0451545758 0.0116256009 0.0764811076 -0.0330137652 0.0277625812 0.0502136584 0.0138738945 0.0363310453 -0.0084305821 0.0144049119 0.0211406119 0.0395032956 -0.0672283210 0.0073501254 0.0978454364 -0.0448415155 0.0294814215 0.0540634564 0.0377620135 0.0464286115 0.1095869581 0.0059872767 0.0524901601 -0.0412911339 -0.0822878236 -0.0105659804 -0.0399292581 -0.0741986836 -0.0041948509 -0.0079392817 0.0064755355 -0.0146175075 0.0267366426 -0.0350822882 -0.0376953190 -0.0061434069 -0.0392725212 -0.0314472954 -0.0471446280 0.0138184209 -0.0723203074 -0.0651641617 0.0705846580 0.0323095686 -0.0497096920 0.0882646710 0.0479616844 0.0094314954 0.1101261787 0.0603924108 -0.1799616166 0.0384291222 0.0631878746 -0.0011307104 -0.0986364190 0.0014131861 -0.0299583319 -0.1210724803 0.0367959636 -0.0037232849 0.1138675347 0.0384179667 -0.0709952083 0.0994904408 0.0989011215 -0.0704461127 0.0579491473 0.0157010795 0.0235316673 0.1195181881 0.0513088434 0.0176061542 0.0993108856 0.1007750092 0.0268753306 0.1305995634 0.0375547041 -0.1994697200 0.0146724972 0.0427216663 -0.2023211247 0.0753005427 0.1279953077 -0.2155579945 0.0061025115 0.0408526796 -0.0670131429 -0.0959744536 0.0603927896 -0.0245875406 -0.1658757333 0.0541097462 -0.0185100617 -0.1218066856 0.0266017699 0.0334157714 0.0344899732 -0.0166535571 0.0068142414 -0.0032389117 0.0233628777 0.0152646496 0.0147210228 0.0213832525 0.0487760798 0.0711707972 -0.0221894109 0.0757469159 0.1086128344 -0.0677954284 0.0680350584 0.0899312662 -0.0652817856 -0.0216087776 -0.0443143517 0.0593916790 -0.0036882081 -0.0115177989 0.0543623170 0.0563348777 0.0946296086 -0.0151849520 0.1030804279 0.1536380308 -0.1020580895 0.0881802556 0.1201555782 -0.0973488497 -0.0049103528 0.0061244156 -0.0113815992 -0.0008727992 -0.0046708140 -0.0047784809 -0.0007772570 -0.0137909800 -0.0019589196 -0.0052204012 -0.0099495578 -0.0061095511 -0.0092401306 0.0012356331 -0.0127290095 -0.0044678288 0.0121403689 -0.0135775332 0.0015527557 -0.0057681875 -0.0021324400 0.0032657917 -0.0276382376 0.0065160036 -0.0049913896 -0.0165695200 -0.0039268396 -0.0124004633 0.0031727683 -0.0157881830 0.0865016143 0.1617144237 -0.0528548904 0.0320257264 0.0451917260 0.0292367030 0.0066046247 -0.0402540207 0.0137549556 0.0036570206 -0.0258104013 0.0067254475 0.0260565012 0.0091379354 0.0251930581 0.0095904655 0.0027393347 0.0074933340 0.0355639460 0.0072859576 0.0518535966 0.0295672984 -0.0008354774 0.0592653761 0.0479046546 0.0128837934 0.0667936525 0.0372029814 -0.0017517873 0.0809119158 0.0034398001 -0.0067579090 0.0114592988 0.0130631932 -0.0084371029 0.0373200125 -0.0081547109 -0.0124441161 -0.0053062048 0.0079881891 -0.0156986099 0.0411731102 -0.0000778460 -0.0018223964 -0.0154792949 0.0077196534 -0.0089084895 -0.0254864792 0.0022540120 -0.0065338501 -0.0114780585 0.0145198388 -0.0188430963 -0.0206438128 -0.0052726661 -0.0000795757 -0.0007229339 0.0163077569 -0.0220190669 -0.0180159936 0.0205046372 -0.0219320654 -0.0352494890 0.0248844995 -0.0271446745 -0.0334145188 0.0269228493 -0.0279644097 -0.0442998740 0.0353535628 -0.0372928894 -0.0412440551 0.0714408697 -0.0836870069 -0.0258038168 0.1014079316 -0.0931377453 -0.0197863421 0.0496435382 -0.1253965814 -0.0289942488 0.1008407604 -0.0677309562 -0.0197586303 0.0445842925 0.0257655042 -0.0572700715 0.0629443827 0.0335632093 -0.0672037076 0.0141380367 0.0625523862 -0.0435258435 0.0756781420 0.0324619432 -0.0725308844 0.0028921226 -0.0111216003 -0.0112615137 -0.0067628396 0.0163123416 0.0316429832 0.0002650932 0.0072515250 0.0094421116 0.0159669530 -0.0089253077 -0.0314705195 0.0099206024 -0.0198635810 -0.0343354056 0.0311085523 -0.0169784431 -0.0354495990 0.0201644352 -0.0082237538 -0.0313610688 0.0083343054 0.0117948275 -0.0082928529 0.0230255646 -0.0067527753 -0.0214452521 0.0005182583 0.0203011405 0.0024917526 0.0424070467 -0.0261121057 -0.0453579624 0.0131062083 -0.0337874707 -0.0457163212 0.0284669833 -0.0428020393 -0.0467872546 0.0416640830 -0.0654673733 -0.0456643223 0.0114766758 -0.0350074242 -0.0413554925 -0.0575490129 0.0113208746 -0.0654042574 -0.0442948156 -0.1006353047 0.1163087963 -0.0499177068 -0.0734584701 0.0737790135 -0.0625681720 -0.0054898521 -0.0286266254 -0.0242499082 -0.0846264119 0.0617964882 -0.0818086024 -0.0291758030 0.0323756813 -0.0895138024 0.0065556227 -0.0217517015 -0.0289554935 -0.0504198338 0.0106183645 0.0011377477 -0.1201227060 0.0944688284 -0.1000677427 -0.0216143187 0.0428298643 -0.1180938320 0.0444382049 -0.0558692948 -0.0627847902 0.0166236261 -0.0571282859 -0.0427685160 0.0225065239 -0.0324146095 -0.0485054013 0.0258385664 -0.0145995686 -0.0261076557 0.0229863361 -0.0131116280 0.0141356458 0.0191932172 0.0555088795 -0.0106504138 0.0242605330 0.0237023516 -0.0237939860 0.0211162451 -0.0193488771 -0.0026152419 0.0188429327 0.0165864063 0.0091154303 0.0222802296 0.0569102293 -0.0135948378 0.0264999985 0.0285541965 -0.0377810417 0.0208310654 -0.0498249346 0.0012288564 0.0166795508 0.0173406208 0.0213351923 0.0228174938 0.0864624174 0.0308475209 0.0173110726 0.0848562495 -0.0044691268 -0.0594447685 -0.0000910692 -0.0055425397 -0.0655358871 -0.0168605982 0.0186286385 -0.0094348863 -0.0051478293 -0.0042203398 0.0064650415 -0.0547496095 0.0020584242 -0.0089010106 -0.0331639740 0.0049573215 -0.0160863348 -0.0098429276 0.0084966699 -0.0224012209 -0.1137661178 0.0147828565 -0.0052650513 -0.0714341081 -0.0341028668 -0.1036269240 -0.1568435336 0.0616061172 0.0613766104 -0.1946997673 0.0061579639 -0.0217034190 -0.0215759120 0.0158856763 -0.0406313642 0.0117671079 0.0071868000 -0.0381306486 -0.0502086674 0.0178367459 0.0083061648 -0.0990710128 0.0249900117 0.0259741252 -0.0434963919 -0.0311679700 -0.1040863299 -0.1755379027 -0.0350660582 -0.1083902914 -0.1765162934 -0.0442691074 -0.1297926917 -0.1312706557 0.0568320943 0.0504753577 -0.2198183114 0.0657341714 0.0625377669 -0.2664016455 0.0977486558 0.1286040377 -0.1567262981 0.0154795520 -0.0235080244 0.0336918002 0.0186350540 -0.0476715812 0.0191451203 0.0214949587 -0.0656392616 0.0069975535 0.0032120737 -0.0072623843 0.0186760594 -0.0138703234 0.0297345836 0.0209398448 -0.0027747041 0.0564935858 0.0476185350 0.0215901307 0.0317809368 0.0800466435 0.0351994326 -0.0161209820 0.0889940723 0.0268287176 -0.0323743835 0.0547692649 -0.0353929490 0.0418410887 -0.0012838437 -0.0154470510 0.0929360489 0.0440323599 0.0302268069 0.0503790977 0.1092173116 0.0535513694 -0.0378683309 0.1175278434 0.0406700707 -0.0662866099 0.0547881278 0.0251404967 0.0103509181 0.0090426567 0.0166502727 0.0126242587 0.0309819975 0.0012388417 -0.0080025385 0.0383536556 -0.0044980490 -0.0312098965 0.0260989481 0.0042708633 -0.0312000996 0.0038253666 0.0363445522 0.0273913446 0.0021177743 0.0212066393 0.0304844523 0.0414859691 -0.0096681747 -0.0040809571 0.0616034404 -0.0150126731 -0.0487303642 0.0330724748 -0.0005835628 -0.0492599038 -0.0070824693 0.0448649505 -0.0063240825 0.1524171969 0.0217167270 0.1189454139 0.0869741018 -0.0285303355 -0.0163618760 0.0678200107 0.0006408803 0.0099866983 0.0742929574 0.0076446965 0.0203501809 0.0139958355 0.0157354589 0.0123781100 -0.0047426212 0.0086832571 0.0456047512 0.0498423643 0.0184120707 0.0632992810 0.0696867744 0.0022564876 0.0516657262 0.0643020930 0.0197999727 0.0833454998 0.0996193190 0.0260025201 0.0306579254 0.0149465136 0.0275891245 0.0558923605 0.0521391591 0.0325803420 0.0262562107 0.0043077663 0.0364745743 0.0709249003 0.0688074454 -0.0030650735 0.0155886066 -0.0148020883 -0.0073339373 0.0239675523 -0.0023233793 -0.0314158906 0.0357530281 -0.0062451867 -0.0631477000 0.0629330986 0.0162635480 -0.0304703665 0.0307204668 -0.0158203807 -0.0867123700 0.0789605356 0.0236916947 -0.0376668738 0.0506117441 0.0198559533 -0.0660582803 0.0705294951 0.0299863051 -0.0407322262 0.0564929346 0.0298817767 -0.0913790394 0.0923481354 0.0483076402 0.0008267536 -0.0002231562 -0.0554574794 -0.0020262731 0.0070983377 -0.0606098915 -0.0006037872 -0.0062195951 -0.0434932699 0.0105972571 -0.0070091525 -0.0622244032 -0.0049136648 0.0115468162 -0.0654576975 0.0069770758 0.0238982102 -0.0691623485 -0.0146688978 0.0087364941 -0.0791414422 -0.0058750607 0.0048329465 -0.0556088950 0.0755278972 0.0264689128 -0.0589769768 0.1013736613 0.0350001653 0.0054662118 0.0862315933 0.0284059006 -0.0136866126 0.0445718025 0.0120096653 -0.0532258268 0.0550457229 0.0210821810 -0.0719599342 0.0145623626 0.0217138384 -0.0565194059 0.0216131597 0.0145554412 -0.0537403565 -0.0099151071 0.0240418386 -0.0502495629 -0.0016704821 0.0274724997 -0.0542686207 -0.0206646879 0.0270080254 -0.0496486689 0.0162299746 0.0260611268 -0.0570090961 0.0457419332 0.0406099111 -0.0808344144 0.0173113652 0.0280666425 -0.0388322334 0.0386292543 0.0477161365 0.0028986406 -0.0247018652 -0.0023956464 -0.0411242545 -0.0402184723 -0.0182582333 0.0227559727 -0.0586431149 -0.0269198155 0.0189219515 -0.0517584130 -0.0264257163 0.0241223883 -0.0355834564 -0.0246847595 0.0336272962 -0.0442142452 -0.0300599409 0.0260581182 -0.0498729229 -0.0229850646 0.0291728187 -0.0413509409 -0.0221148017 0.0346584990 -0.0362119849 -0.0282873198 0.0309325283 -0.0452486503 -0.0334087045 0.0224655994 -0.0546730950 -0.0207327460 0.0285242653 -0.0399609238 -0.0191773281 0.0384730603 -0.0344839885 -0.0215483950 0.0302528605 -0.0388720612 -0.0199509017 0.0241961581 -0.0305266182 -0.0275201246 0.0304065247 -0.0527680839 -0.0207645262 0.0059344810 -0.0917150155 -0.0162397121 -0.0657728739 -0.0774239550 -0.0182826380 -0.0523368233 -0.0417779879 -0.0238677826 0.0388865003 -0.0624922818 -0.0209092659 0.0015478245 -0.0973623878 -0.0153080589 -0.0883369905 -0.0818718935 -0.0179105761 -0.0732678641 -0.0139605615 -0.0297022207 0.0983904171 -0.0509194508 -0.0245553670 0.0264346423 -0.1172997832 -0.0119507257 -0.1364565259 -0.1078396337 -0.0136601124 -0.0962273034 -0.0335711472 -0.0300621795 0.0292874831 -0.0343498472 -0.0247041616 0.0023894530 -0.0104845676 0.0352799578 -0.0469939498 -0.0335261983 0.0067277015 0.0429689896 -0.0240635067 0.0334151977 0.0055469839 -0.0179412893 0.0346770499 -0.0365913015 -0.0007155372 -0.0203279880 0.0491511239 -0.0479549309 -0.0672995423 0.0199661011 0.0484589359 0.0322188877 0.0807403653 0.0010157561 -0.0829161535 0.1093317586 -0.0209897174 0.0657940793 -0.0029860586 -0.0189749963 0.0995278461 -0.0599628747 -0.0206580990 -0.0195682571 -0.0075823517 -0.0546532476 -0.1030833218 0.0886028138 -0.0955206532 -0.1070972001 -0.0320130622 0.0615493769 0.0439818985 0.1049452676 0.0537287391 0.0181962047 0.0891994622 0.0359375244 0.0595394755 0.0602384224 0.0338262234 -0.0477194604 0.1255494465 0.0153852084 -0.1196934420 0.1655665248 -0.0445749522 -0.1253984051 0.0803274488 -0.0216110514 0.0679386418 -0.1010252654 -0.0175284027 0.1185646457 -0.0583232729 -0.0164601386 0.1383134488 -0.0629262555 0.0749175564 0.0228833307 -0.0621311201 0.0589886123 -0.0116707442 -0.0330934711 0.0418539559 -0.0525490542 0.0015269253 0.0416332795 -0.0567798865 0.0055396759 0.0588685703 -0.0117476434 -0.0336982824 0.0764492290 0.0294442262 -0.0689901426 0.0564315827 -0.0155673134 -0.0296210304 0.0289672367 -0.0879086202 0.0322442890 0.0274597244 -0.1244961566 0.0621324703 0.0594230582 -0.0157310792 -0.0295973680 0.0893557853 0.0581365815 -0.0933345232 0.0015968453 0.0355715015 -0.0326811092 -0.0009339582 0.0293076219 -0.0138810487 -0.0169761559 0.0218631989 -0.0104277931 -0.0316019063 0.0258284156 -0.0260163188 -0.0287432105 0.0333522063 -0.0448104946 0.0141649275 0.0389999427 -0.0348646240 0.0101881338 0.0267852569 -0.0012580257 -0.0168158793 0.0053513992 0.0137144324 -0.0436898592 0.0206048617 -0.0230125695 -0.0397919866 0.0338638447 -0.0568936461 0.0243858863 -0.1814363036 0.1012482051 0.0198026567 -0.1231070773 0.0689791533 -0.0264763814 -0.0045183981 0.0189482797 -0.0071643324 0.0011478949 0.0278968567 0.0809387716 0.0252197018 0.0184877371 0.0593384565 0.0148151749 -0.0086498562 0.0989708122 0.0366297329 0.0881243413 0.0969803851 0.0392128993 0.1300399462 0.1156038386 0.0453791960 0.1112014833 0.1115696219 0.0501158087 0.1876374057 0.0574150144 0.0149987873 0.0267127697 0.0760402814 0.0274434352 0.0967756238 0.0422628307 0.0068662403 0.0033081052 0.0748125165 0.0286378079 0.1277064398 0.0020498737 0.0168849248 -0.0424249560 -0.0111406187 0.0200336894 -0.0423017518 -0.0112425977 0.0192876811 -0.0275269579 -0.0340657741 0.0230361835 -0.0150278259 -0.0049919122 0.0196962213 -0.0239177812 -0.0455590440 0.0260021392 -0.0034985708 -0.0321763221 0.0220634234 -0.0305647908 -0.0432802669 0.0237513230 -0.0167892343 -0.0417022510 0.0233293957 -0.0317748191 -0.0606846557 0.0263330203 -0.0069946946 -0.0401966481 0.0199581392 0.0709577786 -0.0494724854 0.0001352958 0.0865844755 -0.0350459535 0.0324752066 0.0629027483 -0.0429238261 0.0393505193 0.0855739314 -0.0413915324 -0.0085858609 0.0376221328 -0.0434553012 -0.0181193465 0.0349991657 -0.0371168325 -0.0111931306 0.0377026246 -0.0538828660 -0.0058012868 0.0364879476 -0.0338251197 -0.0477367493 -0.0167968373 -0.0544798803 -0.0425840677 -0.0415835176 -0.0407273765 -0.0385790853 -0.0290841350 -0.0046752255 -0.0234110863 0.0066139370 -0.0156061494 -0.0429891162 -0.0025030408 0.0376202329 -0.0412139217 0.0101618151 0.0149088988 -0.0220791786 0.0133832229 0.0614292677 -0.0368889256 0.0089331352 0.0605501222 -0.0502068432 0.0064520652 0.0769979267 -0.0404771568 0.0092249236 0.0321079819 -0.0505391048 0.0112793141 -0.0071978138 -0.0584837849 0.0036876980 0.0129207169 -0.0777269341 0.0161757270 0.0281013492 -0.0902977440 0.0267450785 0.0000154179 -0.0899767270 0.0140656633 0.0326620335 -0.0616530375 0.0365139649 -0.1199368005 0.0344789973 -0.2168838058 -0.0832111338 0.0118362732 -0.1540974901 0.0072364027 -0.0465797610 -0.0004050679 -0.0572276262 -0.0031802620 -0.1062154971 -0.0610559136 -0.0021460531 -0.1179252636 -0.0135344667 -0.0342080476 -0.0367037413 -0.0119394300 -0.0321225504 -0.0271832448 -0.0736532620 0.0083794509 -0.1326459910 -0.0771749488 0.0072801609 -0.1477247115 0.0054544204 -0.0496978449 -0.0097361965 0.0323924682 -0.0619646382 0.0366404125 0.0255735201 -0.0574454387 0.0248920309 0.0458050608 -0.0762400246 0.0449874224 -0.0003760098 -0.0609183098 -0.0046047007 -0.0719652273 -0.0647466635 -0.0997193274 -0.0117259197 -0.0755503102 -0.0316970277 -0.0210324526 -0.0505573909 -0.0193770058 -0.0569872477 -0.0519986693 -0.0655086889 -0.0482522071 -0.0765663914 -0.0804283173 0.0077112120 -0.0856949817 -0.0182889060 -0.0092273540 -0.0426293532 0.0064098342 -0.0724594610 -0.0438422434 -0.0733806672 -0.0578951748 -0.0864736125 -0.1041392972 -0.1009310720 -0.0656120186 -0.1387511948 0.0114130860 -0.0438509388 0.0151814118 0.0130624756 -0.0646020479 0.0168683039 0.0580991389 -0.0455035078 0.0028704856 0.0488125996 0.0030747277 0.0755405744 0.0326081255 0.0338209636 0.0305244500 0.0148771773 0.0652735234 -0.0158206651 0.0151518522 0.0551920264 0.0179796279 0.0107190848 0.0575461069 0.0396784259 0.0407202143 0.0258908951 0.0094540202 0.0011828744 0.0765332857 -0.0022715155 0.0301057063 0.0413190044 0.0260437516 0.0061255370 0.0758340174 -0.0355474558 0.0321156642 0.0615100571 0.0400360686 0.0017399290 0.0583909062 0.0661909929 -0.0057294396 0.0492478550 0.0257277027 0.0269856479 0.0134208300 -0.0224877072 0.0376855648 0.0409727068 0.0257938057 0.0663503257 0.0078172791 0.0173258524 0.0077399821 0.0763273954 -0.0270904357 0.0022114196 0.0734751207 0.0047229633 -0.0159578886 0.0942395827 0.0018526361 -0.0206487406 0.0464707146 -0.0799252616 0.0085882133 0.0720140501 -0.0290178886 0.0119388413 0.1363509605 -0.0419270523 -0.0322015005 -0.0429362279 -0.0043560308 -0.0771800496 -0.0673409618 0.0485327194 -0.0620169009 -0.0319560177 0.0657698941 -0.0052287693 0.0215231982 0.0329832652 0.0383571973 0.0405476873 -0.0207977343 0.0246498983 0.0101082693 -0.0419660988 -0.1204023697 -0.1062572491 0.0768101544 -0.0941689004 -0.0452712743 0.1067223693 0.0088093807 0.0586821235 0.0645682497 0.0844567674 0.0820573707 -0.0444414059 0.0599451165 0.0301490944 -0.0849101733 0.0547834731 -0.0385370025 0.0010713808 0.0261758373 0.0193712552 -0.0142087056 0.0006787652 0.0700844030 -0.0277794181 0.0072391704 0.0511258835 -0.0249639689 0.0380820505 -0.0097093537 -0.0079366345 0.0712308579 -0.0680979313 0.0104982771 0.0215793305 0.0319364430 -0.0160991127 -0.0333262397 0.1466890093 -0.0455368038 -0.0138370647 0.0906394242 -0.0363882247 0.0415375399 -0.0175001044 -0.0062089541 0.0482037686 0.0704573713 0.0675229112 -0.0204154625 0.0731552924 0.0852015991 -0.0542617055 0.1441029947 -0.0443928184 -0.0388811508 0.2086784085 -0.0605859558 -0.0307882255 -0.0204243776 -0.0217916496 -0.0113671443 -0.0112558665 0.0023857349 -0.0394656003 -0.0092889418 -0.0337084061 -0.0278406182 0.0108496575 -0.0181446680 -0.0555531786 -0.0170392258 -0.0543058363 -0.0342777411 0.0189578561 -0.0269319535 0.0009075743 0.0099417874 0.0203631272 -0.0072036281 0.0210263801 0.0108820738 0.0174957668 0.0170458909 0.0410028871 0.0025995300 0.0372074489 0.0253565833 0.0086893276 -0.0051252624 0.0195002692 0.0334327561 -0.0114749524 0.0176483039 -0.0271840244 0.0209361538 0.0286510270 -0.0408680974 0.0439801104 0.0410624392 -0.0468957834 0.0232293255 0.0259119303 -0.0711158579 0.0647317731 0.0503070509 0.0223226554 0.0118626840 0.0288386239 -0.0161857747 0.0399865488 0.0414098690 0.0426101875 0.0079088146 0.0290496911 -0.0273944250 0.0583165411 0.0514881332 0.0684010141 -0.0123928402 0.1087493891 0.0740124829 -0.0338186901 0.1245038052 0.0608534631 -0.0266019632 0.1063042649 0.0877619524 0.0108174646 0.1221516674 0.0438796036 0.0235903813 0.0446815422 0.0600474485 0.0002943466 0.0243856859 0.0314758446 0.0414421703 0.0547199496 0.0376755472 0.0425506451 0.0199201569 0.0072036005 -0.0041261673 0.0079900852 0.0166657890 0.0013303755 0.0373463997 0.0117026284 -0.0046481325 0.0214382083 0.0005500902 -0.0184500714 -0.0182414865 0.0021771127 -0.0138287862 -0.0129575197 0.0022711100 -0.0217738504 -0.0178298097 -0.0005238746 -0.0187572921 -0.0188750169 -0.0056235113 -0.0087224031 -0.0059918701 -0.0006839540 -0.0167411335 -0.0107296503 -0.0092089194 -0.0044861681 -0.0005069734 0.0075757983 -0.0266172490 -0.0222228046 0.0028229956 -0.0207541932 -0.0217803594 0.0128743889 -0.0192972544 -0.0326023256 0.0018726629 -0.0194715501 -0.0468468749 0.0292913819 -0.0067351410 -0.0318111586 -0.0428120580 0.0783102166 0.0142300647 0.1366080823 0.0748202204 0.0900013753 0.1053460211 0.0717255204 0.0675074570 0.0274050489 0.0673476192 0.0119281898 0.0726578546 0.0861784097 0.0601302872 0.0970288435 0.0540601861 0.0445868669 0.0577038992 0.0523617078 0.0135970232 0.0343542629 0.0825392342 0.0331747107 0.0803886343 0.0999301339 0.0817116671 0.1183492176 0.0441280427 0.0471986276 0.0506907243 0.0382324459 -0.0047856270 -0.0132378613 0.0568040953 0.0026176321 -0.0188663468 0.0124908298 -0.0021434997 0.0089059269 -0.0085233852 -0.0210631360 -0.0700414244 -0.0140345983 0.0089688906 -0.1641114089 -0.0659631121 0.0259204597 -0.0793605632 -0.0655869136 -0.0122873700 -0.1078906944 0.0099751135 0.0402773312 -0.1547424337 -0.0151441969 0.0476250179 -0.1257593406 -0.0915727357 -0.0034804747 -0.0506333626 -0.0848007925 -0.0370537193 -0.1029261522 0.0536108205 0.0561858218 -0.1800884133 0.0025329430 0.0629844248 -0.1324320208 -0.1314472746 -0.0208839400 -0.2023107089 -0.0868837495 0.0318681439 0.0180368415 0.0896864829 0.0315512195 0.0140266105 0.0826727359 0.0087159897 -0.0002870840 -0.0218435957 -0.0020909401 -0.0070678585 0.0054654596 -0.0177084601 -0.0010349701 0.0090729685 -0.0219038839 0.0027576743 0.0064699424 -0.0303271237 0.0082304743 -0.0084897256 -0.0430885997 0.0090758297 -0.0112692293 -0.0565757974 -0.0055598869 -0.0022188962 -0.0414795740 0.0302143253 -0.0126388756 -0.0389196370 0.0033470870 0.0141214410 -0.0184964518 0.0004551123 0.0249751954 -0.0370247648 0.0013505613 -0.0110665875 -0.0580898889 0.0119564559 -0.0105602525 -0.0662211142 0.0174724579 -0.0108121847 -0.0522849590 -0.0297143105 -0.0191111996 -0.0443891377 -0.0128795553 0.0278540196 -0.0322149649 0.0167898194 -0.0031100471 -0.0467346575 0.0297101411 -0.0091696929 -0.0236860580 0.0329011493 -0.0165174539 -0.0509375263 0.0428688239 -0.0157345694 -0.0374793260 -0.0163540444 0.0151102189 -0.0537291145 0.0051347864 0.0218744407 -0.0255405234 0.0103961760 0.0454833753 -0.0465992881 0.0142782860 0.0087168664 0.0089735864 -0.0161870667 -0.0284643131 0.0521411639 -0.0136585033 -0.0254230069 0.0650073362 0.0231274678 0.0371116165 0.0169848892 0.0588343919 0.0880968668 -0.0434552718 0.0507302930 0.0659010962 -0.0406542386 -0.0403268704 -0.0626175352 0.0819907734 -0.0374085746 -0.0670636435 0.1110528076 0.0271219150 0.0512138119 0.0395581452 0.0902500666 0.1424295244 -0.0852931445 0.0724287274 0.0984088727 -0.0751355568 -0.0027288097 -0.0040488391 0.0009494267 -0.0006395919 -0.0141310504 0.0123993750 0.0037221320 -0.0423492441 0.0207098339 0.0063892234 -0.0605291092 0.0191795890 0.0043172233 -0.0495310563 0.0072466892 -0.0055518457 0.0174265757 -0.0065466361 -0.0023594645 -0.0003791947 0.0141122339 0.0031776888 -0.0484260113 0.0301969138 0.0101308554 -0.0829504703 0.0264653479 0.0066231984 -0.0645333766 0.0051083583 0.1169665151 0.3762987985 -0.1617064246 -0.0605322940 -0.2624048285 0.2562684275 -0.0031625161 -0.0467444506 0.0289018548 0.0084797035 -0.0534146629 0.0381170161 0.0086402898 -0.0119249581 0.0085163671 0.0026347949 -0.0194383957 -0.0112913361 0.0114145562 -0.0131798976 0.0152295143 0.0070243397 -0.0218350585 0.0025412371 0.0172462183 -0.0073699119 0.0301268239 0.0089540298 -0.0227899365 0.0070733546 -0.0019197651 -0.0274361958 -0.0215427318 0.0005053319 -0.0287885743 -0.0160442494 -0.0082337454 -0.0317964498 -0.0335730145 -0.0026711224 -0.0345071189 -0.0256037648 -0.0057994554 -0.0102596649 -0.0145347433 -0.0086833394 -0.0053580569 -0.0071714131 -0.0100271302 -0.0051439268 -0.0165024106 -0.0184268441 0.0045970410 -0.0099946347 -0.0072404713 -0.0086964960 -0.0225764295 -0.0221029384 0.0086112312 -0.0113163751 -0.0171532773 0.0044017365 -0.0005465833 -0.0223457438 0.0096763925 -0.0015004348 -0.0199726822 0.0080986288 0.0054099276 -0.0292274572 0.0177400199 0.0039553813 -0.0080772077 0.0082351579 -0.0098954868 -0.0188291387 0.0112461527 -0.0117149873 -0.0051994050 0.0102823372 0.0020654568 0.0001613575 0.0046131612 -0.0141046508 -0.0077361637 -0.0028845385 -0.0120053892 -0.0094939101 0.0075876235 -0.0067317883 -0.0065368088 -0.0111789063 -0.0213171209 -0.0084355616 -0.0115083039 0.0000973077 -0.0318179474 -0.0422031487 -0.0572758204 -0.0350845019 -0.0321922644 -0.0408833827 -0.0318446422 -0.0319443731 -0.0396498382 -0.0227769066 -0.0296269104 -0.0321315562 -0.0247430806 -0.0382564185 -0.0462333935 -0.0047816537 -0.0437062149 -0.0286957258 -0.0185676603 -0.0291370010 -0.0292018337 0.0375701267 -0.0499323325 -0.0396007272 0.0241260032 -0.0534713807 -0.0320950670 0.0573189180 -0.0575448058 -0.0442823341 -0.0168288839 -0.0561034970 -0.0237921650 -0.0203536342 -0.0423421906 -0.0402605234 -0.0112896954 -0.0472945160 -0.0349880127 -0.0207372532 -0.0296298415 -0.0347929596 0.0128425393 -0.0502486071 -0.0405913941 0.0226773372 0.0822810696 -0.0147861143 0.1118172530 0.0596889013 0.0609252279 0.0944185483 0.0626544407 0.0420445165 0.0536277788 0.0729243722 -0.0024700039 0.0625706822 0.0788232013 0.0057885715 0.1022067345 0.0518340705 0.0520495563 0.0814880637 0.0572824727 0.0273488557 0.0421648103 0.0821233189 -0.0157590869 0.0572896518 0.0877655126 0.0003899530 0.1219832703 0.0413429299 0.0762690748 0.0882592870 0.0483499743 0.0348910440 0.0386615625 0.0720986133 -0.0101351534 0.0412486073 0.0510291867 -0.0053495064 0.0496754439 0.0453205624 -0.0178793496 0.0210030944 0.0377477182 0.0068040059 -0.0169620828 0.0093501388 0.0344994455 0.0066249327 0.0159963702 -0.0268514649 0.0162394977 0.0447575263 0.0557746298 -0.0020554947 0.0308690505 0.0695977429 -0.0124690283 0.0019754908 -0.0138088189 0.0103873496 0.0101165027 -0.0641777591 0.0291021633 0.0579824061 0.0858778849 -0.0029555132 0.0364190632 0.1079773862 -0.0236830850 -0.0147941433 -0.0413886604 -0.0315329492 -0.0015991563 0.0452488344 0.0287391380 0.0905655949 -0.0399684327 0.0283059025 0.0702339353 -0.0372619576 0.0247744159 -0.0627692424 -0.0179878638 0.0525691643 0.0416352417 -0.0276997720 0.0039672542 0.0236611550 -0.0021271716 -0.0238990770 0.0498121358 0.0392783505 -0.0366918498 0.0926202057 0.0521650200 0.0089792427 0.1233535866 0.0329638196 -0.0037895241 0.0793434314 0.0516363900 -0.0973448283 0.0957073142 0.0480789010 -0.0179006337 -0.0282155343 -0.0170352381 -0.0723494745 -0.0522988225 0.0185420338 0.0471763796 0.1614539245 0.0120824016 -0.0133355828 0.1504236363 0.0662954102 0.0222480884 0.0722646041 0.0010145134 0.0116166838 0.0871520803 0.0296163689 0.0031907864 0.0627743937 0.0689507756 0.0064955005 0.0752709094 0.0517897560 -0.1165315659 0.0720573099 0.0268704048 -0.1136279716 0.1257560848 0.0686671551 -0.1078968503 0.0929757264 0.0444424543 -0.0850850034 -0.0268260574 0.0483035111 -0.0827222204 -0.0974962793 -0.0025020254 -0.0906702535 -0.0539158957 0.0352974554 -0.0314184689 -0.0411461041 -0.0560626441 -0.0603504843 -0.0559871862 -0.0223345260 -0.0567895077 -0.0460765023 -0.0008723369 -0.0256425158 -0.0276821073 -0.0083243793 0.0038833636 -0.0106017670 -0.0468661830 0.0014434727 -0.0135573529 -0.0744226220 -0.0822951859 -0.0720173501 -0.0118779594 -0.0782584981 -0.0574294217 0.0272393542 -0.0225773596 -0.0351377326 0.0380522784 0.0298606264 0.0033610439 -0.0509600605 0.0255461030 0.0020503942 -0.1045329686 0.0099661947 -0.0085183611 -0.0180930912 0.0048738893 -0.0089016840 -0.0020397279 0.0141262110 -0.0625506110 0.0138555487 0.0287522798 -0.1182614643 0.0163398517 0.0347557236 -0.1167737423 0.0000629752 0.0043039601 0.0360300795 -0.0336458186 -0.0069186145 0.0352931504 -0.0039295090 0.0021762124 -0.0500334457 0.0262804814 0.0347689201 -0.1589874571 0.0294942446 0.0467500245 -0.1585830130 0.0002617400 -0.0165757431 -0.1472040251 0.1188854952 -0.0260021498 0.0674705292 -0.0023461655 -0.0098193541 -0.0692437896 0.0365028661 0.0041393866 -0.0174578145 0.0245775961 -0.0252453272 -0.0148615639 -0.0068544808 -0.0201256287 -0.0155345066 -0.0076596657 -0.0205880369 0.0094717845 0.0392149582 -0.0091456759 0.0337030365 0.0859744684 -0.0252897565 0.0105217163 0.0414060651 -0.0044528158 0.0541851207 0.1263743257 -0.0088916434 0.0060428495 0.0309655609 -0.0032308732 0.0311739021 0.0800661912 -0.0025013282 0.0042106012 0.0262264747 0.0064058827 0.0491244938 0.1148955945 -0.0199804914 -0.0178372933 -0.0261479481 0.0155636872 -0.0298118207 -0.0352264134 -0.0584172427 0.0076424475 -0.0122023321 -0.0578504053 0.0205967225 -0.0097151992 -0.0909727481 0.0179137523 -0.0025668522 -0.0900252619 0.0413784693 0.0022165305 0.0201210631 -0.0184327670 -0.0352981745 -0.0156673930 0.0067420435 -0.0226585039 0.0498387184 -0.0289396788 -0.0440177225 -0.0134757730 0.0164492119 -0.0216305906 0.0800615993 0.0041683884 -0.0606361569 0.1268062213 0.0037130572 -0.0625326858 0.0600203360 -0.0285993844 -0.0860053822 0.0771795815 0.0087154990 -0.0568889877 0.0768319267 0.0874941572 -0.0104473486 0.0802574379 0.1099520617 -0.0041127120 0.0593621351 0.1036624112 -0.0079782273 0.1153769885 0.0815323160 -0.0104092120 0.0207538614 -0.0012599399 0.0161786797 0.0014214964 0.0177305573 0.0222188203 0.0128584616 0.0108993179 0.0063257463 0.0407891010 -0.0123914209 -0.0467056578 0.0348140066 -0.0116685895 -0.0125164610 0.0515075109 -0.0244511107 -0.0855141429 0.0451147287 -0.0258893704 -0.0698937043 0.0193356261 -0.0218411812 -0.0786637123 0.0446574618 -0.0280900714 -0.0953394509 0.0062319282 -0.0186782416 -0.0786655971 0.0374238322 -0.0001673574 -0.0730489884 0.0424508031 -0.0225914024 -0.0019482814 0.0304311754 -0.0110646188 -0.0076233877 0.0599280074 -0.0343208230 0.0149949055 -0.0070517785 0.0185813463 0.0079687260 0.0565434514 -0.0347119347 0.0793719960 0.0251837365 0.0519901298 -0.0578590788 0.0336559920 0.0308954075 -0.0212198806 0.0496990389 -0.0211831971 0.0608946412 0.0187356665 0.0372588216 -0.0101345480 0.0595764056 -0.0019921744 0.0134788749 0.0687336424 -0.0293567819 0.0579498916 0.0255226868 0.0108290264 0.0316496012 -0.0009499862 0.0630580180 -0.0362192148 0.0712750625 -0.0066292415 0.0046984545 0.0903566259 -0.0558735912 0.0845335247 0.0521867305 -0.0323758713 0.0750103711 0.0287677226 -0.0163421378 0.0477304618 0.0128521295 -0.0013523076 0.0256611680 0.0401226515 0.0022471478 0.0175092721 0.0672215976 0.0404935582 -0.0484064322 0.0376944932 0.0334583145 0.0111658732 0.0523998539 -0.0078129929 -0.0167198084 0.0674550829 0.0104486156 -0.0476158055 0.0515149346 0.0522540095 -0.0218818301 0.0246682832 0.0432226486 0.0326533982 0.0479588662 -0.0276912097 -0.0275364203 0.0748907110 0.0025268892 -0.0744380385 0.0492209253 0.0760216960 -0.0266098421 0.0778708917 0.0546519713 -0.0741194719 0.0063201286 0.0170412252 0.0427700851 0.0079531325 0.0287884422 0.0329919608 0.0312736782 -0.0161265485 -0.0851697904 -0.0416122633 -0.0172294611 0.0558393188 -0.0688528246 -0.0241610022 0.0673213831 -0.0780626877 -0.0198041685 0.1091881340 -0.0734861776 -0.0247294372 0.0478453261 -0.0714172186 -0.0188995017 0.0680566556 -0.0452896598 -0.0912545706 0.0180532759 -0.0646344184 0.0239767436 -0.0000560943 -0.0901446932 -0.0393758477 0.0383390054 -0.1210884602 -0.0513737311 0.0562891736 -0.0228533977 0.0064624258 0.0589710856 -0.0913144104 -0.0128852200 0.1214969773 -0.0955771851 -0.0494239461 0.0336812179 -0.0246424480 -0.0819748122 -0.0383592304 -0.0364771062 -0.1125173488 0.0294223401 -0.0289223361 -0.1211219233 0.0389660210 -0.0682137418 0.0137095105 -0.0269673801 -0.0657610999 0.0289820426 -0.0233226235 -0.0606996958 0.0606975059 0.0171350129 -0.0997956399 -0.0393386007 0.0768391630 -0.1366126383 -0.0625557589 0.0195952373 -0.1507192699 -0.0631239414 0.0834924106 0.0118682363 -0.0142684780 0.0370296802 0.0329539615 0.0098296986 0.0075021644 0.0339331931 0.0108990938 -0.0080978047 0.0148523291 -0.0087039728 0.0044637934 -0.0114330176 -0.0460431663 0.0493112877 -0.0136576588 -0.0521131940 0.0688833900 0.0512069647 0.0331879958 -0.0121959650 0.0519016918 0.0372200032 -0.0397843750 0.0223045811 0.0343806578 -0.0538407606 -0.0295415645 -0.0625554506 0.0588650460 -0.0325357903 -0.0782723994 0.0980806804 0.0560062051 -0.0121933054 -0.0548362799 0.0373128375 0.0010808697 -0.0199119991 -0.0086399019 0.0070253912 -0.0182332299 -0.0374890628 0.0061702760 -0.0511645068 -0.0172957245 -0.0038000453 -0.0852659391 0.0905018391 -0.0163196439 -0.0559561675 0.0584318069 0.0046610122 0.0064980422 -0.0271452859 0.0122317313 0.0262820116 -0.0746320086 0.0129342857 -0.0497161017 -0.0404712268 -0.0049035379 -0.1114442044 0.0166592985 0.1099158561 -0.1082895273 0.0335316802 -0.0003882202 -0.0496059352 -0.0621611025 -0.0081753321 0.0367872058 -0.0074566473 0.0357212114 0.0515485608 0.0193258318 0.0155906056 -0.0213726130 0.0344593956 0.0065266595 -0.0403017609 0.0112483958 0.0304311863 -0.0271230127 0.0185227605 0.0390107378 -0.0445824261 -0.0007298538 0.0352943616 -0.0161373868 0.0121332147 0.0501153381 -0.0494240321 0.0431991942 0.0198897707 -0.0475278865 0.0354603801 0.0354728168 -0.0510795203 0.0542681946 0.0190415844 -0.0472050571 0.0428670641 0.0459349861 -0.0577852163 0.0030175487 -0.0118649746 -0.0469636163 -0.0179829940 -0.0046822959 -0.0427811318 -0.0513559898 0.0141801273 -0.0126981457 -0.1440901506 0.0572224556 0.0448397206 -0.0309208903 0.0042299214 -0.0262833307 -0.1947894106 0.0809272715 0.0784044829 -0.1043302128 0.0355981686 0.0122216936 -0.1747957736 0.0707126381 0.0611485495 -0.1234212468 0.0435327444 0.0201013957 -0.2511996055 0.1071084778 0.1098125863 -0.0470994551 -0.0186023064 0.0196004751 -0.0183346561 -0.0189732040 0.0183256088 -0.0517319715 -0.0190283803 -0.0135406415 -0.0762518486 -0.0176796571 0.0255175806 -0.0286680871 -0.0202369384 0.0943422429 -0.0481243066 -0.0132616236 0.1101015722 -0.0188097866 -0.0274180982 0.0953909441 -0.0144863554 -0.0256623742 0.0986083514 0.0016237027 0.0245043792 0.0849994176 -0.0089167022 0.0615367148 0.1461153473 -0.0029071751 0.0437895410 0.1013902369 0.0133876266 -0.0081778925 -0.0142887679 0.0089831508 -0.0013376515 0.0224340320 0.0072609783 -0.0081617553 -0.0185493221 0.0206155643 -0.0173292738 -0.0264529333 -0.0659355916 0.0311612910 0.0237885021 -0.0323984465 0.0146348195 0.0011331429 -0.1041978493 0.0543424850 0.0466304290 0.0171950560 -0.0070096726 -0.0240832671 0.0111252908 -0.0169417324 0.0019597769 0.0176640177 -0.0084330804 -0.0155824683 0.0189810441 -0.0125624283 -0.0168878673 0.0186819062 -0.0027651052 -0.0138241160 0.0063684510 0.0044499131 -0.0912077987 -0.0527249899 -0.1163982652 0.0652026689 -0.0417089596 -0.0887805076 0.0364304867 -0.0117511542 -0.0199660302 -0.0314700701 -0.0095285061 -0.1016937245 0.0141525645 -0.0603953259 -0.0403913273 0.0209697158 -0.0447391857 -0.0057785595 -0.0120221340 0.0043057733 -0.0656450570 -0.0236155977 0.0031874535 -0.1389224388 0.0214868611 -0.0859823793 -0.0298091798 0.0371345957 -0.0614266312 0.0327516167 -0.0253009377 0.0062810980 0.0083452197 -0.0566070886 0.0325758004 0.0227526091 -0.0259448043 0.0364351258 0.0164735638 0.0092629036 0.0310564982 0.0218351693 -0.0295233851 0.0107646972 0.0161564654 -0.0467925693 0.0200365986 0.0177590644 -0.0554021889 0.0338710984 0.0211598417 -0.0100377819 0.0230777466 0.0187661405 -0.0176484980 0.0090609237 0.0155440623 -0.0652145929 0.0193342264 0.0166326422 -0.0705421703 0.0436253552 0.0194484894 0.0119183944 0.0222649720 0.0206796246 -0.0020654501 -0.0003221421 0.0133581270 -0.0879071594 0.0029817098 0.0151431618 -0.0549615392 0.0235799980 -0.0720346557 -0.0534039716 0.0248019850 -0.0712527689 -0.0446022823 -0.0357480062 0.0205304798 -0.0033588613 0.0857812789 0.0628385779 -0.0250868845 0.0403937313 0.0369395053 0.0107585647 0.0282032890 0.0384781214 0.1032158323 0.0289459557 0.0421440194 0.0580329658 0.0674833268 0.0633264123 0.0283312517 0.0040468258 0.0200705753 0.0449578185 0.0485579644 0.0538083148 0.0463649356 0.0052822307 0.0017312622 -0.0317287699 -0.0521327144 -0.0171412850 -0.0060211731 0.0904869793 0.0962939368 0.0090523076 0.0519528824 0.0855421726 0.0471432439 0.0854740827 0.0219072551 0.0058879597 0.0016562236 0.0171564659 0.0408542263 0.0029914211 0.0181714504 0.0328584757 -0.0035114701 0.0119467076 0.0538039996 0.0379707625 0.0463753781 0.0567541822 0.0469181914 0.0606148868 0.0196197657 0.0734286757 0.0605603797 0.0548388875 -0.0480793339 0.0016591775 0.0187351648 -0.0696691135 -0.0515336779 -0.0453861493 -0.0841697609 -0.0164067784 0.0230856380 -0.0076840385 0.0082547409 0.0916204287 0.0157868529 -0.0084939841 0.0749390280 0.0033518105 -0.0406984831 0.0579728752 -0.0315418217 -0.0476032281 0.0530727483 -0.0560359921 -0.0278756169 0.0686791888 -0.0438017431 -0.0031605189 0.0913648572 0.0436429019 0.0000643684 0.0745252411 0.0221040502 -0.0589614042 0.0467262276 -0.0437829476 -0.0826519928 0.0294884009 -0.0855330046 -0.0349945053 0.0646272647 -0.0639566410 0.0086499898 0.1065174364 -0.0684148822 0.0711916969 -0.0252175043 -0.0615866045 0.0648624892 -0.0327811521 -0.0242776417 0.0092214820 -0.0183212309 0.0078229832 -0.0411771140 0.0053453675 0.0016720414 -0.0345291353 0.0123832864 -0.0978283157 0.1152462651 -0.0389517166 -0.0845420988 0.1018693441 -0.0502113500 -0.0185460374 0.0046942667 -0.0273017389 0.0386573636 -0.0856063530 0.0171665506 0.0283500083 -0.0759929079 0.0291538295 -0.0602164461 -0.0079059796 -0.0273354023 -0.0381667681 -0.1840499014 0.0677452468 0.0062983764 -0.0435005400 0.0002742158 -0.0397471084 0.0517301119 -0.0631972106 -0.0027470171 0.0322645656 0.0385677036 0.0041983633 0.0069021498 -0.0216236011 -0.0121823056 0.0391074115 0.0190126698 -0.0176540175 0.0188246535 -0.0658391841 -0.0162795762 0.0583054788 0.0662305852 -0.0260232104 0.0216839154 -0.0871590206 -0.0009405531 -0.0074788530 -0.0950232507 -0.0120030708 -0.0038070418 -0.1232172835 -0.0007482602 -0.0210793370 -0.1294455512 -0.0161639753 -0.0164314419 -0.1878055872 0.0111952168 -0.0134861813 -0.0202529088 -0.0461594467 0.0163485169 0.0134946348 0.0496091734 -0.0339329362 -0.0418314940 0.0212857747 -0.0227424748 -0.0244865451 0.1021553729 -0.0572868417 -0.0703179865 0.0525477291 -0.0386676162 -0.0430089170 -0.0812552755 0.0305434109 0.0351776761 -0.0497297914 0.0117559290 0.0181583884 -0.1321661989 0.0560599529 0.0644014447 -0.0766783997 0.0227286567 0.0348889610 0.1192130394 0.0184521013 -0.0515669656 0.1692701794 0.0131036041 -0.0497800029 0.0958904906 -0.0205780776 -0.0769910745 0.1221555078 0.0287003845 -0.0446269836 0.1037145890 0.1158041394 -0.0303120740 0.1186270847 0.1228930167 -0.0383578768 0.0793773601 0.1385523777 -0.0263748762 0.1315591333 0.1221874093 -0.0448814186 -0.0065216620 0.0148542256 0.0456802169 -0.0148145865 -0.0059697479 -0.0140877338 -0.0105629306 0.0025723188 0.0084729850 0.0028215024 0.0172538712 0.0428050698 0.0008497111 0.0172315373 0.0531319345 0.0311931826 -0.0025656300 -0.0266918131 0.0084009705 -0.0010245533 0.0137907261 0.0416080919 -0.0561231598 -0.0711076703 0.0457684546 -0.0311577733 -0.0683556251 0.0511885762 -0.0766299202 -0.1009006635 0.0315412795 0.0312534803 -0.0197277570 0.0048450958 0.0032418991 0.0485953717 0.0210413378 0.0143513187 0.0213333075 0.0390182165 -0.0276567746 0.0141554388 0.0006553554 0.0452574037 0.0344921400 -0.0769770786 0.0375787034 -0.0361885487 0.0403167529 -0.0295857847 0.1464261227 0.0156220307 -0.0135768059 0.1030602457 -0.0465945558 0.0232079766 -0.0049092027 0.0278487623 -0.0198202588 0.1156232760 -0.0280546198 0.0112214036 0.0314430255 -0.0615770049 0.0321555585 -0.0243709026 -0.0045338708 0.0003897868 0.0596921904 0.0615278586 -0.0413499237 0.1706316117 -0.0368586964 0.0159351694 0.0174000278 -0.1000369125 0.0563253222 -0.0813708013 -0.0654622873 0.0309191225 -0.0291075105 -0.0340746498 0.0087204654 0.0083034392 -0.0240480583 -0.0017672159 0.0312336293 -0.0444555287 0.0028887953 0.0127877342 -0.0874411320 0.0005701687 -0.0431506474 -0.0536036534 -0.0053603991 -0.0096788312 -0.0488787623 0.0069361277 0.0225081103 -0.0722934597 0.0066329757 -0.0093169179 -0.0753324089 -0.0058943147 -0.0370696163 -0.0448935703 -0.0107437223 -0.0101085431 -0.0314830365 0.0088108586 0.0587848385 -0.0756809408 0.0094546951 -0.0062556105 -0.0836718695 -0.0109544924 -0.0574152602 -0.1064633302 0.0003189991 -0.0696710309 -0.0021908290 -0.0028539099 0.0715652960 -0.0022806058 0.0076228551 0.0599483224 0.0379106536 -0.0217807996 -0.0657413758 0.0673890576 -0.0068830760 -0.0442605294 0.0594100950 -0.0007964038 -0.0535956563 0.0461769714 0.0203700189 -0.0893178317 0.0491274343 0.0102980248 0.0094580690 0.0396651975 -0.0047393987 -0.0180963392 0.0639060771 0.0830924028 0.0465128507 0.0148574114 -0.0663180353 0.0837860067 0.0660796988 -0.0132399185 -0.0368720740 0.0537436588 0.0009793411 -0.0622080200 0.0518027373 0.0179389801 -0.0312234002 0.0346527514 -0.0137206574 0.0098228358 0.0252807478 -0.0251613035 -0.0398026637 0.0671027615 0.0896822242 0.0869389018 0.0639740357 0.0783987264 0.0454871959 0.0400930798 0.1198608911 0.0207429145 0.0233104543 -0.0506981900 0.1139199152 0.0150846343 -0.0745987358 0.1436691369 -0.0133646822 -0.1288120043 0.0497623200 0.0174839525 -0.0095035520 -0.0846926041 0.0627836206 -0.0141844928 -0.0388191410 0.0722241404 0.0374982645 -0.0797450561 -0.0062001043 0.0168567868 0.0357719725 0.0148653373 0.0267115694 0.0115895763 0.0168519468 0.0323173150 -0.0169597431 -0.0042704624 0.0272369794 -0.0194072210 -0.0238559456 0.0188704820 0.0049179045 -0.0247473213 0.0147199884 0.0322951255 0.0278345375 0.0293737796 0.0134066240 0.0326517953 0.0399410210 -0.0377381966 -0.0090548845 0.0246736563 -0.0485788709 -0.0389471581 0.0149176206 0.0031994204 -0.0411283157 0.0110111875 0.0500147029 0.0772375392 -0.0479546420 -0.0281957342 0.0617648360 -0.0407814471 0.0075797638 0.0068150936 -0.0134742486 0.0035289938 -0.0341322840 0.0132683699 -0.0364294317 -0.0191648360 0.0129412633 -0.0725599595 0.1200049726 -0.0705413159 -0.0232754667 0.0899331645 -0.0543812989 0.0377849713 -0.0121824531 -0.0096192106 0.0492834369 -0.0768582281 0.0339857764 -0.0390911317 -0.0529660116 0.0351005541 -0.1035793271 -0.0422821467 -0.0321891213 -0.0187436290 0.0211042922 0.0775837521 -0.0994117325 -0.0578624558 -0.0005958807 0.0427655651 0.0190905299 -0.0170219424 0.0939868473 -0.0115781046 -0.0034319415 -0.0135822476 -0.0023110813 0.0103675561 0.0214444365 -0.0245925697 -0.0294873998 -0.0866628718 -0.0285594282 -0.0401280019 -0.1188306891 -0.0324528281 -0.0433714750 -0.1217405660 -0.0398413003 -0.0630872152 -0.1820802763 -0.0042432498 0.0063182041 0.0086382107 -0.0175711635 -0.0192678362 -0.0637519643 0.0034219328 0.0202324068 0.0467847096 -0.0200685278 -0.0246719819 -0.0802391971 -0.0133386448 -0.0204518929 0.0201344248 0.0027700737 -0.0463278173 -0.0208077371 -0.0636305973 -0.0098314721 0.0718527636 -0.1139812044 -0.0133791825 0.0973382593 -0.0690039169 0.0024132903 0.0930024322 -0.1596489517 -0.0019900484 0.1438308555 -0.0406620973 -0.0537286523 0.0007212592 -0.1042781660 -0.0332721719 0.0631622468 -0.0297616070 -0.0719843365 -0.0299006954 -0.1442953118 -0.0340286733 0.0841850919 0.1019269384 -0.0401149005 -0.0174241260 0.0947219875 -0.0330386095 -0.0222954486 0.0918261233 -0.0702251002 0.0205309184 0.1525037933 -0.0442793154 -0.0298762553 0.0700890449 0.0306910384 -0.0810987058 0.0935552968 0.0292896625 -0.0980300090 0.0447571897 0.0556787808 -0.0760525843 0.0788355139 0.0372443731 -0.0912015816 -0.0074637725 0.0073688601 -0.0438162653 -0.0029801637 -0.0409170888 -0.1413264800 -0.0073189842 -0.0189794596 -0.0857699996 -0.0184878155 0.0379660271 0.0515077699 -0.0133651337 0.0317282010 0.0156166300 -0.0056402549 0.0324840746 0.0170949032 -0.0259529594 0.0367994643 0.0476167572 0.0595158693 -0.0418108860 -0.0530215848 0.0302802929 -0.0038046403 -0.0279660309 0.0974381445 -0.0760311984 -0.0940676276 -0.0069644125 0.0492193641 0.0229017784 -0.0181255901 0.0431633644 0.0187345786 -0.0150502102 0.0379050590 0.0226811688 -0.0101007144 0.0332946025 0.0254596302 -0.0145529789 0.0232702455 0.0183544293 0.0407880440 0.0088226060 -0.0395803950 -0.1023258894 -0.0465315566 -0.0422873146 -0.0708167323 -0.0346144906 -0.0317260906 0.0052614395 -0.0017172200 -0.0116685833 -0.0557084718 -0.0386217930 -0.0700070168 -0.0462270741 -0.0156981678 0.0219444734 -0.0083745402 0.0014650226 0.0302722584 -0.0154757013 -0.0227644210 -0.0574753260 -0.0748051544 -0.0534480037 -0.1138472903 -0.0573257669 -0.0125200570 0.0539304950 0.0088606904 0.0181837879 0.0669455634 0.0349621887 0.0153059395 -0.0169291736 0.0352599573 0.0336879397 -0.0159738708 0.0232023740 0.0442985299 -0.0186187166 0.0451010323 0.0384140257 -0.0174130252 0.0596923011 0.0452969090 -0.0157863072 0.0264437627 0.0528529594 -0.0609219124 0.0687820642 0.0280688387 0.0223321021 0.0775410475 0.0310580375 0.0268304040 0.0328741075 0.0564260586 -0.0623601049 0.0061621812 0.0614159178 -0.0946029785 0.0801930471 0.0153432014 0.0488238510 0.0941948545 0.0249129339 0.0598593941 0.0176822339 0.0676364189 -0.0987021836 0.0667336412 0.0483205287 -0.0143984901 -0.0008614020 -0.0257296337 -0.0910208816 0.0023112871 -0.0310688811 -0.0520832644 0.0302029100 0.0004509049 -0.0335085296 0.0127931674 0.0108211330 -0.0180687706 0.0013453873 0.0013337436 -0.0042088587 0.0135542591 -0.0240258086 0.0635221944 0.0039309541 0.0066303476 -0.0013876962 0.0339551864 0.0411708764 0.0332551460 -0.0240213215 -0.0375815425 -0.0266410593 0.0042103636 0.0690716296 -0.0612198602 -0.0223607001 0.0117387837 -0.0475464516 -0.0361845063 0.0065998830 -0.0405085980 0.0144304427 -0.0015304765 0.0590609236 0.0393834514 0.0691867739 -0.0207781267 0.0681371105 0.0782065701 0.0766862460 -0.0211900875 -0.0370540613 -0.0314344759 -0.0244877777 -0.0423459328 -0.0435559383 -0.0343800751 -0.0513437081 -0.0110974683 -0.0151077860 0.0438430970 -0.0885583205 -0.0042623101 0.0924186982 -0.1063670222 0.0310642515 0.1167792682 -0.0341045191 0.0129659443 0.0091305232 -0.0250660790 -0.0566934220 0.0217836958 -0.0919272493 -0.0766620431 -0.0141010474 -0.0031625037 -0.0070622613 0.0086124067 -0.0414606820 -0.0183195222 0.0097594477 -0.0303529521 -0.0290943800 -0.0153954953 0.0083340846 -0.0226770347 -0.0332362067 0.0277418162 -0.0083394198 -0.0234290487 0.0083656009 -0.0016567403 -0.0058290594 -0.0239548807 -0.0206650153 0.0223803705 -0.0447506725 -0.0400672247 -0.0247733435 0.0248865118 -0.0275712584 -0.0682321455 0.0760049799 -0.0037981045 -0.0352245090 0.0216677622 0.0087001178 -0.0069431589 -0.0338064440 0.0846990772 -0.0836046890 0.0030106332 0.0785825879 -0.0836203583 0.0208517686 0.0201386202 -0.0031975662 0.0004490693 -0.0381608278 0.0893204012 -0.0424997640 -0.0335178698 0.0921765559 -0.0597564760 0.1315375447 -0.1510989392 0.0238522193 0.1180294849 -0.1451331861 0.0514500763 0.0199558964 -0.0223145901 0.0295188263 -0.0865907207 0.1554048763 -0.0599077832 -0.0809302337 0.1648244451 -0.0900309105 0.0086653637 0.0172664288 0.0275018701 -0.0681331557 -0.1808665755 0.1628131475 -0.0109398739 0.0252698042 0.0020223037 0.0523087752 -0.0887108596 0.0833339932 -0.0107912471 -0.0175886086 -0.0460444508 -0.0131811156 0.0174030027 0.0395415863 -0.0118284599 -0.0488987811 -0.0893575912 -0.0118999510 -0.0419294886 -0.0386687040 -0.0123752909 -0.0783059237 -0.1622703079 -0.0126859948 -0.0662087555 -0.0722387925 -0.0119579297 0.0242960825 0.0942179593 -0.0115841153 -0.0036483572 0.0592840445 -0.0081264690 0.0478644195 0.1558203109 -0.0117828064 0.0004084096 0.1035286976 -0.0243396096 0.0109742845 0.0409629665 0.0318381403 -0.0333738124 -0.0185688161 -0.0704355962 0.0215753901 0.0872957553 -0.0577040919 -0.0084860035 0.0740533936 -0.1172543796 0.0520994114 0.1311808439 -0.0965294675 0.0010007215 0.1138792433 0.0536527798 -0.0681581458 -0.0378378124 0.0091837596 -0.0548441907 0.0076197255 0.1029871000 -0.1041005652 -0.0875286821 0.0242495507 -0.0799774415 -0.0060149619 -0.0065122564 0.0254586690 -0.0547418658 0.0143429652 0.0228726022 -0.0535768671 -0.0047038068 0.0386667953 -0.0901261383 -0.0461050379 0.0266569552 -0.0465973889 0.0191935412 -0.0034613383 0.0146694426 0.0073977230 0.0119978672 0.0295788196 0.0298480474 -0.0180018441 0.0073697804 0.0264090343 -0.0177644755 0.0317472172 0.0079715940 -0.0143873081 -0.0547075618 0.0123693772 -0.0292585801 -0.0807904815 0.0095016958 -0.0210919343 -0.0602754946 0.0033351933 0.0043910313 0.0036163997 0.0051256795 -0.0013528653 -0.0248736157 -0.0091411275 0.0170168422 0.0220607668 -0.0050931168 0.0143660488 0.0200839378 -0.0310525631 0.0264678189 0.0325219328 -0.0281798017 0.0274303810 0.0310529423 -0.0381150755 0.0304988860 0.0363195865 0.0132255516 0.0056228946 0.0071946873 -0.0007408544 0.0088741988 -0.0296604989 0.0096285911 0.0023683810 -0.0277468329 0.0001520070 0.0076846575 -0.0362101405 0.0250752502 -0.0161721693 -0.0360306020 0.0114734048 0.0395582167 0.0173400967 -0.0806911530 -0.0291386013 0.0541300016 -0.0597040502 -0.0127115855 0.0492167784 -0.0042960611 0.0276432060 0.0375433150 -0.0340309794 -0.0233562686 0.0293040489 -0.0593256869 0.0179440676 0.0623957742 -0.0312494126 0.0390329832 0.0558348727 -0.0068079276 -0.0015464099 0.0223114927 -0.0347319131 -0.0479985844 0.0167226094 -0.0802115121 0.0266433492 0.0761714373 -0.0344948276 0.0657687067 0.0605255249 0.0161442730 0.0389611675 0.0332813475 0.0273497309 0.0329097428 0.0462654848 0.0368050191 0.0254438840 0.0526187623 -0.0067015524 0.0277592822 0.0213470941 -0.1324850331 0.0223895233 -0.1370415752 -0.0122038014 -0.0016200632 0.0086615866 -0.0622502476 0.0528649482 -0.0403588015 -0.1243912081 0.0505275126 -0.1190535579 -0.0746447883 -0.0044545743 -0.0698494041 0.0296798650 -0.0217147967 0.0527376497 -0.0620691128 0.0744422212 -0.0382766551 -0.1628044358 0.0668328186 -0.1675111937 -0.0799904166 -0.0274220981 -0.0834273502 -0.1840117415 0.0200533906 -0.2040596413 0.0133332579 -0.0074459887 -0.0014961673 0.0112808093 -0.0179080531 -0.0225325055 -0.0242286017 0.0280748914 0.0217685220 0.0586267816 -0.0103698190 0.0102955332 0.0048934520 -0.0481205710 0.0620194204 -0.0034083398 -0.0571652325 0.1981356916 0.0010689898 -0.0458795617 0.0431652892 0.0712510253 -0.0110078063 -0.0221266272 -0.0902111217 -0.0521332348 0.0204679487 0.0843390414 -0.0420626949 0.0379093229 -0.0432938838 -0.0934319834 0.0045279933 -0.1265717086 -0.1134791595 0.0294723258 0.0690309773 0.0060650025 -0.0339441062 0.0634485470 0.0323413709 -0.0545124887 0.1330645343 -0.0375538664 -0.0127550104 -0.1071934213 -0.0625470285 0.0276886573 -0.0976961461 -0.0309391011 -0.0102779731 -0.0887441127 -0.0633408007 0.0298061732 0.0605475098 -0.0496316268 0.0968180145 0.0849448485 -0.0332566814 -0.0390390232 0.1646632055 -0.0456757936 0.0540830820 -0.1325522910 -0.0911590321 0.0550405532 -0.1481449701 -0.1651603062 -0.0178687723 -0.1648069584 -0.0988761819 0.0636710401 0.0074906863 -0.0126766598 -0.0477004974 -0.0088569538 -0.0022609104 -0.0359648888 -0.0021718913 0.0150187291 -0.0213680290 0.0187789324 0.0167758592 -0.0157823568 0.0314444759 -0.0042799842 -0.0186972173 0.0248366980 -0.0180538539 -0.0358519578 -0.0246200281 -0.0019273732 -0.0419413970 -0.0115748204 0.0324322669 -0.0195290230 0.0319751123 0.0636181663 -0.0214857300 0.0487037823 -0.0027783854 -0.0136124006 0.0362802091 -0.0298976093 -0.0423849686 -0.0163530871 -0.0125119554 0.0180288809 -0.0064248082 -0.0216043383 0.0036645806 -0.0047058205 0.0125931518 -0.0071675095 -0.0120264059 0.0550718834 -0.0047554723 -0.0220338584 0.0605167537 0.0101709348 -0.0189448782 -0.0400334675 0.0281277235 -0.0008288890 -0.0538162079 0.0014721190 0.0070507944 0.0019091941 -0.0224398632 -0.0095039429 0.0811437873 -0.0137497879 -0.0278886144 0.0916251041 0.0135685781 0.0449607956 0.0545323117 -0.0123404849 0.0293374809 0.1138907466 -0.0417546523 0.0122234817 0.0429589925 -0.0453581859 0.0102833128 -0.0468316196 -0.0116329050 0.0099270959 -0.0144998552 -0.0257728092 0.0073619630 -0.0013258126 0.0064793101 0.0152208551 -0.0161805949 -0.0125127531 0.0192631827 -0.0034298163 0.0344256669 0.0166946847 -0.0259277379 -0.0365457731 0.0237563070 -0.0027966134 0.0486621411 0.0109121702 0.0071497894 0.0434437180 0.0169721926 0.0073062760 0.0617114240 0.0109337387 0.0131226796 0.0585056363 0.0196010605 0.0146061076 0.0956656841 0.0005941299 0.0085929154 0.0168199734 -0.0088399807 0.0111942381 0.0188373647 0.0319477965 -0.0107400064 0.0036813801 0.0655336190 -0.0341422172 -0.0188842299 0.0364878473 -0.0095281927 0.0080154830 0.0957866055 -0.0514169564 -0.0337896338 0.0193947681 -0.0101670295 -0.0008508744 0.0609320504 -0.0352904054 -0.0226394336 0.0130858195 -0.0093893907 -0.0017705682 0.0885576466 -0.0547431213 -0.0416546303 0.0839203872 -0.0526263991 -0.0557956637 0.1242062284 -0.0201124073 -0.0826287128 0.0647100707 -0.0918617075 -0.0542940397 0.0893003545 -0.0830662794 -0.0789231991 0.0795259356 0.0350186543 0.0192925463 0.0897154676 0.0557471339 0.0198081723 0.0571683219 0.0473081785 0.0109148295 0.1090493923 0.0297237703 0.0199110863 -0.0153321572 -0.0145165180 -0.0734062989 -0.0336990049 -0.0587328273 -0.2024902197 -0.0238634537 -0.0312261983 -0.1305351101 0.0041914137 0.0344549032 0.0439209756 0.0003116367 0.0172797917 0.0051792433 0.0075955268 0.0314632579 0.0031604523 -0.0030051160 0.0272902731 0.0375081289 -0.0080198308 -0.0221871628 -0.0356523170 -0.0033980508 0.0178767455 -0.0274584647 -0.0170340916 -0.0360416277 -0.0618368967 0.0226890580 0.0418911713 -0.0023946877 0.0006385384 0.0201097635 0.0150349057 0.0138185361 0.0277178423 -0.0027156809 0.0097481487 0.0119163280 -0.0191645652 0.0205485406 0.0357040630 -0.0017478849 -0.0207798873 -0.0343473740 -0.0404545547 0.1307976283 -0.0659220134 0.1188638702 0.0980128435 -0.0597602140 0.0824049803 0.0135455726 -0.0459895887 -0.0066098512 0.0904294087 -0.0571976888 0.0955677718 0.0625718843 -0.0536803174 0.0180286579 0.0226378286 -0.0487551719 -0.0208027098 0.0425718403 -0.0479047183 0.0418339871 0.1159304363 -0.0603376760 0.1432763188 0.0662960267 -0.0544116777 0.0032638191 -0.0020652161 -0.0469206451 -0.0629149636 -0.0176582471 -0.0364535345 -0.0359004030 -0.0163562035 -0.0272172744 -0.0356395036 -0.0111128889 -0.0336944287 -0.0163106928 -0.0059717495 -0.0266012569 -0.0290545847 0.0421452410 -0.0319040000 0.0502581881 0.0030881594 -0.0225524581 -0.0078290005 0.0069927707 -0.0326450865 -0.0160220058 0.0309356631 -0.0353630619 0.0242744147 0.0270412428 -0.0249438765 0.0315536788 -0.0071088677 -0.0175212744 -0.0182942774 0.0002937075 -0.0350856980 -0.0309446669 0.0395646917 -0.0386573510 0.0369359407 0.0348652592 -0.0215040444 0.0505795679 0.0621811809 -0.0338646332 0.0845937637 0.0172097731 -0.0394941739 0.0344321824 0.0169448416 -0.0114774204 0.0202354738 -0.0188960544 0.0433932493 -0.0370543933 -0.0202262786 0.0325112106 0.0064137291 -0.0178960412 0.0222855883 0.0207140999 -0.0116509374 0.0120376506 0.0491914024 0.0006232062 -0.0193408819 0.0073504188 -0.0084172402 -0.0364720789 -0.0239270414 -0.0230432456 -0.0105657788 0.0063102029 0.0628083338 -0.0344423663 0.0213631198 -0.0219622521 0.0201556134 0.0145160190 -0.0176307619 0.0033234295 0.0428969067 -0.0061472985 -0.0142488959 -0.0382368611 -0.0088756013 -0.0469726589 -0.0084982485 -0.0144797336 -0.0549293773 -0.0404603043 -0.0206351961 -0.0073197879 0.0210288251 -0.0233072744 -0.0141669005 -0.0088292304 -0.0389356796 -0.0035506082 0.0045884904 0.0746215799 -0.0146560665 0.0550077460 0.0761074635 -0.0584893945 -0.0013368230 0.0824576284 -0.0435562139 0.0216699029 -0.0121604989 0.0172505829 0.0621595239 -0.0186465966 -0.0013409132 0.0409680428 -0.0194165621 -0.0187409190 0.0449079456 -0.0178256998 -0.0144176163 -0.0675787896 -0.0329970739 0.0100076912 -0.0618321090 -0.0303518190 0.0188985774 -0.0320607804 -0.0101206543 0.0048722359 -0.0117780127 0.0069062713 -0.0170448232 -0.0187450292 0.0008988102 -0.0278001746 -0.0462143038 -0.0467215535 0.0222182779 -0.0794872470 -0.0425141843 0.0381509477 -0.0280410918 -0.0031765122 0.0198417571 0.0164151185 0.0244475942 -0.0256300439 -0.0036767964 0.0141047855 -0.0460711197 -0.0519166346 -0.0638924401 0.1442001769 -0.0579810082 -0.0687341300 0.1522604349 -0.0539414943 -0.0272065652 0.0561643105 -0.0266627023 0.0148415489 -0.0407512141 -0.0035145810 0.0182049401 -0.0398463253 -0.0107403866 -0.0882617858 0.2135172665 -0.0811902394 -0.0981246671 0.2209609812 -0.0704984748 -0.0249202606 0.0476334986 -0.0166841316 0.0471253809 -0.1182638615 0.0194021160 0.0547881252 -0.1163237774 0.0059869426 0.0283119764 0.0441929274 0.0087388320 -0.0287250842 0.0084860172 0.0453678009 0.0133377049 -0.0817749378 0.0568106185 -0.0624864717 0.1713145580 -0.0851291909 -0.0166161141 -0.0083687548 -0.0740671244 0.0031552742 0.0332026973 0.0325735280 -0.0265383820 -0.0169940642 -0.1153970522 -0.0090737661 0.0214415826 -0.0364195538 -0.0483360606 -0.0526022554 -0.2054953276 -0.0157968164 0.0151954199 -0.0644822491 0.0228138843 0.0708972492 0.1096945644 0.0160253740 0.0671593288 0.0839856437 0.0478051530 0.0987425293 0.1851084612 0.0298624880 0.0946068159 0.1515244200 -0.0132212550 -0.0128058267 0.0367033174 -0.0055215496 -0.0414029974 -0.0096421338 -0.0207751308 -0.0341958642 0.0795554284 -0.0153210886 -0.0836878266 0.0660701918 -0.0269338880 -0.0126454987 0.1197162524 -0.0197637174 -0.0989798315 0.0973995053 0.0014844103 -0.0938534597 -0.0252374774 -0.0006119032 -0.1148612975 0.0114493325 0.0081917816 -0.1176972446 -0.0681374696 0.0072514789 -0.1541687272 -0.0015793479 -0.0194883162 0.0304109147 0.0059946740 -0.0058568417 0.0185489597 0.0142481468 -0.0227751346 0.0296298377 -0.0136992489 -0.0311864407 0.0433315883 0.0176367187 -0.0203500451 0.0361319660 0.0055011445 -0.0217407133 0.0297445096 0.0033409605 -0.0208846448 0.0385933822 0.0084328345 -0.0210970272 0.0433752614 -0.0033643336 -0.0233300177 -0.0365663531 -0.0291961279 -0.0746223531 -0.0157540270 -0.0743132504 -0.0431644783 -0.0089627006 -0.0522640734 0.0406962519 -0.0030522239 -0.0010356579 0.0204963714 -0.0268964326 -0.0019082602 0.0286060718 0.0033242547 0.0016659904 0.0496432267 -0.0124390132 0.0005438587 -0.1188834738 0.0485567550 0.0572762783 -0.0636652899 0.0412235134 0.0245573163 -0.1835992136 0.0806841184 0.0842115867 0.0637588156 0.0034060764 -0.0186284862 0.0304306892 -0.0417032540 0.0121167979 0.0391121662 -0.0366492070 0.0018805507 0.0594171072 -0.0649885799 0.0084705130 0.0206900342 -0.0297738005 0.0071807470 0.0093738538 0.0075716667 0.0315946185 0.0185752595 0.0211366064 0.0121098392 0.0192817897 0.0177261095 0.0172872652 0.0171034170 0.0082435973 0.0258985685 0.0239521689 0.0142389966 0.0322626315 0.0159475355 0.0149442849 0.0100720497 0.0142239905 0.0105784771 0.0140943088 0.0227620094 0.0093297340 0.0379098852 0.0278418841 0.0151511054 0.0403137371 0.0128890073 0.0170511067 -0.0025934689 0.0095521963 0.0100892488 0.0058371537 0.0126836686 0.0049330924 0.0261652295 0.0075561677 -0.0013763703 0.0202971779 0.0039968721 0.0024877269 0.0091041670 0.0109088894 -0.0006746926 0.0225769633 0.0194585862 0.0078755421 0.0087618358 -0.0154905492 0.0152064501 -0.0403846628 0.0447665526 -0.0134205792 0.0848286758 0.0496658897 -0.0089856642 0.0784809513 -0.0122745990 0.0203976053 -0.0495834481 -0.0391071371 0.0244198871 -0.0847871678 0.0709354416 -0.0296032245 0.1412220245 0.0741146993 -0.0169416026 0.1245437471 -0.0343724139 0.0345029995 -0.1026437071 0.0221198661 0.0116909298 0.0014466124 0.0273539009 0.0062622549 0.0546726948 0.0271299250 -0.0011966266 0.0390651347 -0.0724954603 0.0606221676 0.0070240040 0.0131327372 -0.0246683102 0.0030458677 0.0082453847 -0.0028497051 -0.0281754970 -0.0053973857 0.0225086892 -0.0856065555 -0.0073192449 0.0212671347 -0.0181118914 -0.0317343591 0.0162391004 0.0314420194 0.0685160581 -0.0090483749 -0.0182769940 -0.0678245442 0.0504917845 -0.0463395010 0.0157278346 -0.0008376077 -0.0172047033 0.0113108590 0.0166352986 -0.0469585185 0.0032126556 0.0213991010 0.0335167339 -0.0432601325 0.0065823294 0.0794273533 -0.0722084417 0.0092841934 0.0070470801 0.0996187239 0.0092356880 -0.0488582903 0.0801299760 -0.0409924902 0.0105620709 0.0710776252 -0.0097531134 -0.0185705283 -0.0618818362 0.0414411507 -0.1038933516 -0.0735439448 0.0574993541 -0.0123846966 -0.1136155949 0.0764800716 -0.0449575594 0.0016225099 0.0018965499 -0.0675093847 0.0140071960 0.0192148126 -0.0407893748 0.0162265663 0.0408175451 -0.0517273521 -0.0342867684 -0.0524121817 -0.0224056563 -0.0549746488 -0.0598594560 0.0003808880 -0.0474931350 -0.0405769155 0.0077528292 -0.0190680893 -0.0144254392 -0.0081297399 0.0015100807 -0.0095466309 -0.0317700355 -0.0074485034 -0.0280062309 -0.0397217721 -0.0737203750 -0.0741112663 0.0104603903 -0.0625724648 -0.0437590941 0.0253168925 -0.0097320504 0.0119505093 0.0072147159 0.0251049985 0.0113826219 -0.0436932337 0.0095112370 -0.0195819817 -0.0599027926 -0.0482684572 -0.0147417818 0.0124727682 -0.0310975967 -0.0406700026 0.0059284310 -0.0434280449 0.0115352984 -0.0097442721 -0.0724310732 0.0986708463 -0.0204847351 -0.0885455401 0.1184917436 -0.0121591876 -0.0445074459 -0.0593984403 0.0281946503 -0.0088197094 -0.1038859967 0.0152169344 -0.0162421158 -0.0373840821 -0.0119674714 -0.0787411553 0.1402320298 -0.0336829233 -0.1112299539 0.1756334384 -0.0192083915 0.0135401983 0.0074998612 0.0181223213 -0.0251840007 0.0364941261 0.0119468798 -0.0095689780 0.0235177049 -0.0461152020 -0.0021437782 -0.1394152093 0.0212024355 -0.0221833482 0.0304383093 -0.0382840659 0.0238810104 0.0370235124 -0.0116525457 -0.0448397667 0.0744195765 -0.0501939094 -0.0136848213 0.1260411791 -0.0326414719 -0.0890465457 0.0678322150 -0.0702894399 -0.0297179620 0.1587321351 -0.0383574644 0.0570755054 0.0900130294 -0.0004255731 0.0368392549 0.1338736919 -0.0058573011 0.0995035602 0.0949117655 0.0182432267 0.0613547477 0.1722411653 0.0095349092 0.0317876910 -0.0325506824 0.0095596139 -0.0697526448 0.0037905557 0.0428993077 0.1160145269 -0.0954487926 -0.0097959390 0.0948018663 -0.1229379905 -0.0041689083 0.2059620873 -0.1212734031 -0.0302319901 0.1682504739 -0.1720075494 -0.0286450545 -0.1079774608 -0.0175265186 0.0585910873 -0.0243343823 -0.0815914584 0.0357725245 -0.1987243983 0.0136904787 0.0835166906 -0.0479268136 -0.0995858588 0.0441686168 0.0157958571 -0.0234846198 0.0178517226 0.0166668630 -0.0351533787 0.0267542826 0.0156094617 -0.0217071313 0.0109236309 0.0165822084 -0.0107413873 0.0269243209 0.0133170775 -0.0252891400 0.0033398216 0.0130820670 -0.0205282468 0.0051662164 0.0130894148 -0.0255453735 0.0025412948 0.0147505607 -0.0291022997 0.0081379048 0.0038409378 0.0225648884 0.0383026283 0.0057077985 0.0285910289 0.0555634956 0.0054780468 0.0265515300 0.0505184578 0.0045004173 0.0191237602 0.0341694026 0.0016970731 0.0123384954 0.0198139656 0.0257438491 0.0078842226 0.0012582571 0.0112254960 0.0101654171 0.0229981983 -0.0042163022 -0.0053500951 -0.0056259173 0.0107985238 0.0051201244 -0.0114157868 -0.0144183700 -0.0076974167 -0.0135226870 0.0531793292 0.0075344222 -0.0133670899 -0.0023205962 -0.0051994119 -0.0226976296 0.0381146786 -0.0145292811 -0.0434984188 0.0206127459 -0.0245249656 -0.0720801465 0.0656141047 -0.0278846909 -0.0533031007 0.0737478584 -0.0098633014 0.0495219822 -0.0154936624 -0.0297164499 0.0115198731 -0.0007690684 -0.0217175969 0.0130129735 0.0355043436 0.0006326318 0.0167114110 0.0156045981 -0.0290699496 0.0058642477 0.0010194208 -0.0037922584 0.0233009554 0.0206666661 0.0068728106 0.0247681718 0.0339105801 -0.0179179834 0.0063242770 0.0143444428 -0.0422140766 -0.0026834265 -0.0129548896 0.0021507142 0.0300584116 0.0225892132 0.0194956616 0.0332437043 0.0477744930 0.0054780873 0.0188534505 0.0205294382 0.0174471107 -0.0100688131 0.0112894770 0.0284131122 -0.0409399778 0.0118720924 0.0211012632 -0.0252552455 0.0025076314 0.0085958437 0.0041919309 0.0649165217 -0.0055067067 0.1016106180 -0.0548936384 0.0457813921 -0.1533244079 -0.0603702810 0.0389734810 -0.1396550461 0.0627450481 -0.0145420722 0.1217585530 0.1101919640 -0.0225715921 0.1932876185 -0.1098299390 0.0759543342 -0.2716714607 -0.1085742111 0.0539533270 -0.2319866634 0.1081204432 -0.0403449893 0.2307164456 0.0013283642 0.0021792842 0.0211728687 0.0507578966 -0.0225765662 -0.0071704484 0.0475136610 -0.0331141549 -0.0345784733 0.0049638834 0.0186396259 -0.0197753200 -0.0582834991 0.0089350179 -0.0083042297 -0.0374064984 0.0021247914 0.0035889917 -0.0273973116 -0.0113874867 -0.0129754624 -0.0395534766 0.0217665072 -0.0083169420 -0.0042167141 0.0334692222 -0.0727895208 -0.0564918168 0.0491225495 0.0036899492 -0.0697548976 -0.0172632587 0.0282148612 -0.0194249906 0.0080889667 0.0282312010 0.0208988436 -0.0056512652 0.0572969531 -0.0282190113 0.0489919521 -0.0892205432 0.0028207820 0.0455723049 -0.1101055219 0.0434067357 0.0138334891 -0.0649901625 -0.1253185247 -0.0008051590 -0.0175362464 -0.0745951446 0.1304024181 0.0403602826 0.0280041848 0.0280860380 -0.0022061102 -0.0811573889 -0.0239812303 0.0441963386 -0.0794048189 -0.0018996587 0.0565004193 -0.0743039318 -0.0532094591 0.0112300355 0.0320256177 0.0057052124 0.0742654214 0.0282761129 0.0097439719 0.0736592824 0.0338208421 -0.0439591953 0.0461359124 0.0058118962 0.0214377197 0.0170079001 -0.0242386030 -0.0686334798 0.0804645236 -0.0284926033 -0.0818105586 0.0748477703 -0.0053437848 -0.0035065109 0.0064865412 0.0267433303 0.0976162252 -0.0748692672 0.0349761492 0.1134017460 -0.0730064353 -0.0428972445 -0.1304639636 0.1430588689 -0.0488475832 -0.1562495534 0.1320370386 -0.0106523141 -0.0359829671 0.0333069246 0.0483209122 0.1620396373 -0.1304875985 0.0603638143 0.1951282093 -0.1310740127 0.0149306434 0.0082435905 -0.0115633150 0.0126938557 0.0091871915 -0.0047368603 -0.0004404682 0.0209730810 -0.0073354799 -0.0150895662 0.0406841535 -0.0189654563 -0.0119951317 0.0396013816 -0.0254498069 0.0264851874 -0.0037133003 -0.0081691564 0.0228138944 -0.0040847094 0.0036593266 0.0049611155 0.0012212458 0.0081626809 -0.0266405925 0.0518255836 -0.0214823203 -0.0220862431 0.0513113882 -0.0328879426 -0.0187907903 -0.0857437294 0.0646672083 -0.0093571787 -0.0160878350 0.0217574008 -0.0028244594 0.0142236319 0.0007190013 0.0172062890 -0.0309044816 0.0296684562 0.0026352144 0.0179775270 0.0260036923 0.0027929292 0.0184958895 0.0269641420 -0.0060724077 -0.0029484930 -0.0272128905 -0.0158309738 -0.0260227240 -0.0848171013 -0.0069166277 -0.0049520700 -0.0322531946 -0.0243377756 -0.0468161631 -0.1369775417 -0.0049714867 0.0030083401 -0.0108476921 -0.0152587292 -0.0213186747 -0.0729701917 -0.0056832466 0.0059291977 -0.0026733977 -0.0234104008 -0.0376149087 -0.1137079216 0.0041459811 -0.0063337911 0.0249286277 -0.0057834536 -0.0135835704 0.0100150771 0.0112644466 -0.0226755980 0.0397028630 0.0007366684 -0.0415770780 0.0415454566 0.0271204118 -0.0205599080 0.0487203196 0.0067688129 -0.0533209172 0.0521550368 -0.0186864968 -0.0321368540 0.0126920927 -0.0161892414 -0.0449555709 0.0295595805 -0.0302467055 -0.0364915306 0.0000048201 -0.0255202349 -0.0582724198 0.0314961515 -0.0748039844 0.0262258892 -0.0134861521 -0.0991765401 0.0436225976 -0.0254570158 -0.0641685237 0.0408062688 0.0073791552 -0.0751091380 0.0059844089 -0.0282651265 -0.0568814319 -0.0163298934 0.0196137245 -0.0708892600 -0.0010593364 0.0353864244 -0.0452788796 -0.0322068275 0.0109567531 -0.0573715048 -0.0298161185 0.0380126297 0.0051441262 0.0350622406 0.0470331296 0.0336927295 0.0393063325 0.1065647967 0.0176905378 0.0309656330 0.0829930964 -0.0227048683 0.0155940998 0.0282531565 -0.0157055594 0.0202448957 0.0137926729 -0.0009086493 0.0077112390 0.0106027357 -0.0206406835 0.0162607602 0.0245248004 0.0137373542 -0.0020050346 0.0002213582 0.0098405543 0.0007072351 0.0027762232 0.0243975952 -0.0096377881 -0.0080414151 0.0230534407 0.0009117659 -0.0038426706 -0.0230719214 0.0082407200 -0.0349046436 0.0177013470 -0.0057482715 -0.0513599762 -0.0054331416 -0.0093693780 -0.0830618001 0.0553858663 -0.0164744562 -0.0619190857 0.0266060049 0.0108628616 0.0311805817 -0.0184730611 -0.0529657906 0.0760302333 -0.0030434615 -0.0397787638 0.0709473907 0.0339837668 -0.0059419383 0.0534337305 0.0148045759 -0.0474621644 0.0531171487 -0.0030315485 -0.0158110242 0.0805454600 0.0194973846 -0.0006224158 0.0763317407 0.0298836375 -0.0275364175 0.0388787704 0.0140282259 -0.0657695800 0.0432671173 -0.0188647439 -0.0089815565 0.0931977092 0.0223183477 0.0158865348 0.0875128853 0.0371607410 0.0051742937 0.0412164058 0.0202421959 0.0007408109 0.0201975771 0.0236293657 0.0004418630 0.0000702646 0.0111188236 -0.0116928759 0.0346317141 0.0002397702 -0.0284779990 0.0616659466 -0.0484951563 -0.0056117705 -0.1062660857 0.0662765785 -0.0280932966 0.1909073088 0.0640353761 -0.0359236604 0.2082863955 -0.0559563119 -0.0119893487 -0.0980078636 -0.0898560864 0.0065181834 -0.2273523199 0.1169281094 -0.0420244823 0.3034916172 0.1080069070 -0.0452260912 0.3243944228 -0.1045840925 -0.0035320349 -0.2154024662 -0.0043448814 -0.0341547167 0.0713571891 0.0360318263 -0.0275835754 0.0030708186 0.0322438411 -0.0267448306 -0.0367347282 0.0122126323 0.0033145321 -0.0036690369 -0.0109700075 -0.0337627552 0.0307283500 -0.0250231302 -0.0232810102 0.0132960444 -0.0207855592 -0.0278169577 0.0343025471 -0.0243307796 -0.0112725175 -0.0421320310 0.0157149021 0.0132952962 -0.0672473632 -0.0185710813 -0.0202323513 -0.0472242589 -0.0041681538 0.0193852622 -0.0730354926 -0.0439543042 -0.0129147150 -0.0218037015 -0.0734354213 -0.0036255371 -0.0418448510 0.0008885780 0.0090737816 -0.0674619029 0.0174714012 0.0411221536 -0.1089952328 0.0633634435 0.0106266319 -0.0470332140 0.0213661127 0.0066190861 -0.0489834176 -0.0060668448 -0.0553938359 -0.0323045405 -0.0240567673 -0.0071837890 -0.0563309807 -0.0257199703 -0.0011295844 -0.0740297498 -0.0117140394 0.0407287225 -0.1195550205 0.0335165456 0.0445331694 -0.0536156660 -0.0496892160 -0.0128632973 -0.0470847832 -0.0893990884 0.0001759417 -0.0810807140 -0.1041380441 0.0089508578 -0.0139245050 0.0117450979 0.0422385801 0.0172754661 0.0105407589 -0.0050221317 0.0356008645 0.0092318339 -0.0084577908 0.0085956711 0.0047046134 0.0320745503 -0.0321496912 0.0069477325 0.0833332756 -0.0589248520 0.0121103661 0.0920718868 -0.0368689268 0.0098986823 -0.0408283241 0.0746366125 0.0092549546 -0.0464957280 0.0263618793 -0.0026503460 0.0123694898 -0.0363089433 0.0061219239 0.1167331324 -0.0923250605 0.0126219058 0.1360015105 -0.0550451190 0.0145318487 -0.0045947244 -0.0040262306 0.0072810573 0.0134192832 -0.0124555799 -0.0003743683 0.0389255578 -0.0193614277 -0.0007177927 0.0429188375 -0.0187700644 0.0060295216 0.0259623465 -0.0108748439 0.0218209821 -0.0237235619 0.0023008975 0.0085876636 0.0069892372 -0.0127304209 -0.0072248983 0.0597586303 -0.0257067791 -0.0068089514 0.0604923758 -0.0240444457 0.0053416298 0.0325342841 -0.0094267165 -0.0222564772 -0.0431198867 -0.0019094361 0.0137107907 0.0487003793 -0.0653565399 -0.0068136764 0.0458960207 -0.0178966965 -0.0152831279 0.0916374311 -0.0406691491 0.0059603291 0.0055686100 0.0558246726 -0.0173454693 -0.0032711609 0.0280997369 0.0119340043 -0.0294071132 0.0289492690 -0.0135515198 -0.0788303580 -0.0388641557 0.0361903576 -0.0215922006 0.0503960426 -0.0115400359 -0.1090635107 -0.0718128366 -0.0432832574 -0.0482795870 -0.0230518124 -0.0411149510 -0.0880070788 -0.0661596085 -0.0689679616 -0.0538277068 -0.0405391876 -0.0618714139 -0.1245665544 -0.1204150581 -0.0146966567 0.0145425044 0.0205550098 0.0070956155 0.0022707847 0.0059092956 -0.0184364065 0.0167095067 0.0219171104 0.0010665482 0.0066509702 0.0096544707 -0.0341879982 0.0239183114 0.0306068277 -0.0004961856 0.0069516848 0.0113600066 0.0270462904 -0.0075500649 -0.0069383500 0.0249877562 -0.0057710132 -0.0062771084 0.0462240151 -0.0173089830 -0.0182250352 0.0421577572 -0.0144171070 -0.0173059111 -0.0337380405 -0.0125705420 0.0015824441 0.0046769544 -0.0402750276 0.0209646116 -0.0330986704 0.0084241986 -0.0685708156 -0.0953642989 0.0155157498 0.0334247810 -0.0065119243 -0.0436062341 0.0578123290 -0.0139264444 -0.0214728693 0.0716171320 -0.0044010982 -0.0549766381 0.0439439140 -0.0002950311 -0.0570297485 0.0752416106 0.0141183559 0.0022124054 0.0146457021 0.0056609975 0.0036900333 0.0025932765 0.0106851951 0.0052779314 0.0074315317 0.0236891260 0.0066476945 0.0178755578 0.0197718431 0.0007705398 0.0119764437 0.0247449901 0.0051844174 -0.0012719290 0.0252199924 0.0003518575 0.0100419530 0.0010502086 -0.0040676819 -0.0035977737 0.0131823298 0.0046581453 -0.0080627120 -0.0109393023 -0.0038727140 -0.0080328163 0.0313055863 0.0091410485 -0.0042528755 0.0179649319 -0.0033018349 -0.0022758388 0.0206078494 -0.0032540192 -0.0067884056 0.0238193730 -0.0063198004 -0.0042000051 0.0157980148 -0.0122927599 -0.0085391614 0.0231064713 0.0194034259 -0.0737880763 -0.1087211608 -0.0308280035 -0.1183620406 -0.0771070332 -0.0217890961 -0.1037548626 0.0032652394 0.0081963441 -0.0683146824 -0.0634444768 -0.0261877939 -0.1373281294 -0.0489420819 -0.0062553117 -0.0435689952 -0.0095283286 0.0098502733 -0.0328155588 -0.0147235180 -0.0133454907 -0.1101579990 -0.0834502599 -0.0387257296 -0.1819151432 -0.0578335471 -0.0045702559 -0.0085699870 0.0097508675 0.0217729309 0.0059627013 0.0226660088 0.0199966492 -0.0635118473 0.0144234578 0.0183028315 -0.0744608199 0.0418163650 -0.0043624177 -0.0691440985 -0.0197289627 -0.0165836016 -0.0390810649 -0.0637618765 -0.1144420036 0.1660129943 -0.0179779586 -0.0889615722 -0.0328088701 -0.0482730759 0.0068995149 0.0438366629 -0.0717786170 -0.0403538319 0.1457128565 -0.0394687626 -0.1381077022 0.0715024833 0.0039197474 -0.1082483064 -0.1030838293 -0.0518668817 0.0575436758 0.0396368205 -0.0908653937 -0.0194513752 0.2085872806 -0.0341095698 -0.1945283413 0.0825916458 -0.0782896089 -0.1519554451 0.2536456181 0.0178517906 -0.0243727064 -0.1291017913 0.0212869025 -0.0455837108 -0.0809677836 0.0093983543 0.0111602741 -0.0087648507 -0.0140166415 0.0961589682 0.0065495277 -0.0291491657 0.0854993362 0.0245978610 -0.0446571342 0.1001428066 0.0705338520 -0.0109674221 0.0085182603 0.0362955391 -0.0855872061 -0.0559394212 0.0297577824 0.0035491370 -0.0124406802 0.0261704298 0.1011306492 0.0099582943 0.0344562477 -0.0471912595 0.0577463021 0.0073064244 -0.0753539507 0.0214430558 0.0649442530 -0.0276809638 0.0023024387 0.0007131246 -0.1021182348 -0.1099672218 0.1518723075 -0.1787309604 -0.1060361003 -0.0513151238 0.0245909737 0.0019694789 0.0162103820 0.0100631028 -0.0371706298 0.0182354880 -0.0127021082 -0.0153576091 0.0329667200 0.1498416551 0.0618633653 0.0573024230 0.1372552524 -0.0596067079 0.0055490112 0.0999534912 0.0237462348 0.0403032145 -0.0776255888 0.0548190944 0.1079181516 -0.0826934254 -0.0136934498 0.0505796601 -0.0881060149 -0.0070602664 0.0771736228 0.0110446577 -0.0019145579 0.0125005384 0.0170537338 -0.0001694141 0.0057171709 0.0215618317 0.0115725380 -0.0124989595 0.0165257712 0.0177614276 -0.0199358184 0.0080942875 0.0074816258 -0.0061619506 0.0049010379 -0.0010757398 0.0095249683 0.0187454447 -0.0037070393 0.0100383033 0.0289716410 0.0188298900 -0.0241404563 0.0196589590 0.0432572671 -0.0480362996 0.0049969233 0.0112586944 -0.0110212391 -0.0015782820 -0.0032942971 0.0168590894 0.0144709433 0.0147444006 -0.0016381019 0.0192924965 -0.0005520673 0.0122463799 0.0184749613 -0.0190841489 0.0176603765 0.0072096092 -0.0097795599 0.0071995966 0.0035003980 0.0051347225 -0.0058979052 0.0169173868 0.0262266405 -0.0060009451 0.0244149681 -0.0016271582 0.0181032102 0.0302774573 -0.0569658400 0.0381258188 0.0036451936 -0.0193012516 0.0107206165 -0.0028498668 0.0071547711 -0.0123698875 0.0076897809 0.0201180160 -0.0354282189 0.0359013068 0.0877231751 -0.0819762472 0.0221487581 -0.0312121106 0.0233863011 0.0497735269 -0.1173741039 0.0729588604 0.0129826446 0.0074672504 -0.0001328612 0.0213269237 0.0122252313 0.0136209940 0.0049349913 0.0030872763 -0.0307166188 0.0070425197 0.0042660332 -0.0459854402 -0.0040197496 -0.0023615110 -0.0450153416 0.0001148232 -0.0009929403 -0.0734594106 0.0253508890 0.0175597506 0.0077437175 0.0173956617 0.0127704424 -0.0229323710 0.0340584792 0.0227293034 0.0227560042 0.0189202100 0.0142801179 -0.0305115674 0.0172184252 -0.0117743754 0.0137731680 0.0005561666 -0.0119271666 0.0085612977 0.0214610894 -0.0241786325 0.0272255829 -0.0003033519 -0.0323058786 0.0372470158 0.0413635295 -0.0257173414 0.0305581105 0.0015714547 -0.0398567427 0.0469592645 -0.0226068927 -0.0206267312 0.0190261916 -0.0245815658 -0.0291596978 0.0354210027 -0.0405569320 -0.0198583296 0.0136733311 -0.0435886049 -0.0337271378 0.0444546428 -0.0240517351 0.1040127503 0.0013485421 0.0127123497 0.0655258741 0.0289732634 -0.0293063542 0.1111124202 -0.0637225763 -0.0692091938 0.1435961976 0.0385592613 -0.0194008225 0.0826409045 0.0063538134 -0.0243884421 0.0554751722 -0.0016946137 -0.0078221140 0.0750984577 0.0098410100 -0.0319129879 0.0922845923 -0.0055527907 0.0004720467 -0.0238717283 -0.0132594773 -0.0137612816 -0.0275652185 -0.0471202630 -0.0065469465 -0.0237431118 -0.0364986611 0.0114550401 -0.0105330413 0.0001375427 0.0077613831 -0.0185996284 -0.0060586291 0.0067525542 -0.0061351527 0.0047990808 0.0094044415 -0.0071035816 0.0041140406 0.0103947341 -0.0039736068 0.0094788866 0.0094463097 -0.0037179754 0.0101201918 0.0098223774 -0.0036403735 0.0098656584 0.0121611430 -0.0183094413 -0.0002377150 0.0070624381 -0.0208530303 -0.0128879128 0.0177935712 -0.0009779668 -0.0506783662 -0.0240175892 0.0122491383 -0.0927504793 0.0725186639 0.0095061051 -0.0561867743 0.0920005944 0.0149026445 0.0653606777 -0.1318948999 -0.0622811749 0.0073840326 -0.0868403908 -0.0407833735 0.0161806048 0.0323458588 0.0159046340 0.0389497882 -0.0472405731 -0.0562743618 -0.0212402576 -0.0691453337 0.0027685732 0.0665766634 -0.0063547306 0.0312063133 0.0781178046 0.0135348086 -0.0252816002 -0.0111269966 -0.0616516803 -0.0906127373 -0.0650919801 -0.1009878894 0.0153781887 0.0989550577 0.0103262333 0.0630294198 0.1198129278 0.0728125650 0.0271691798 0.0495220787 0.0449004272 0.0240198428 0.0196712591 0.0384986041 0.0350303474 -0.0308655642 0.0183900897 0.0117261793 0.0212884266 -0.0484397702 -0.0267435544 0.0382171205 0.0182226271 -0.0264663487 0.0222992869 -0.0172611941 0.0313682969 0.0235281599 -0.0513751522 0.0128056227 0.0315405829 -0.0144282525 -0.0471583380 0.0330119368 0.0444436072 -0.0421968251 0.0166268050 -0.0235096055 0.0612188806 0.0129425514 -0.0776963769 0.0283616525 0.0298951056 -0.0127423530 -0.0789240118 0.0360374115 -0.0739634759 -0.0419398231 0.0456557124 0.0464368030 -0.0342650716 -0.0569863496 0.0429980440 -0.0422353319 -0.0771180869 0.0082332262 -0.0010436201 0.0103009161 -0.0281650023 -0.0345322969 -0.0073214135 -0.0082814263 -0.0193950371 -0.0296598216 0.0046673589 -0.0298985132 -0.0896931067 -0.0256858822 0.0444534354 0.0046980983 0.0397344684 0.0811658325 -0.0624963169 0.0052674013 0.0799703462 0.0290156980 -0.1692360403 -0.0258490734 0.0726780289 0.0125728412 0.0114658720 -0.0113040648 0.0509903751 0.0338539131 -0.0441016385 0.0029502964 0.0939544162 -0.0804067705 0.0483725381 0.1119382462 -0.1290813096 0.1192186461 0.0595399818 -0.0413266849 -0.0124132185 0.0642742714 0.0031705974 0.0032058204 0.0954606499 0.0537719557 0.0460669545 0.0649259200 0.0292827024 -0.2012239781 -0.0578800303 0.0655835152 -0.2028293228 0.0276605126 0.1782472103 -0.2187957511 -0.0988578438 0.0292650697 0.0740477750 0.0111760835 -0.0670046776 0.0543330076 0.0755423251 -0.0403378381 0.0549094329 0.0320863405 -0.0475135450 -0.0046975608 -0.0275582592 0.0145848241 0.0316732579 0.0676377559 -0.0569066010 0.0356680989 0.0790395740 -0.0538897156 0.0045537862 -0.0076592150 0.0202666483 -0.0343585554 -0.1147335775 0.1115333045 -0.0412503644 -0.1284528369 0.1123961498 0.0565872152 0.1346395603 -0.1242070717 0.0613629039 0.1564163189 -0.1180997049 0.0057323489 0.0089848753 -0.0066138586 -0.0630066306 -0.1886319331 0.1739706649 -0.0715395133 -0.2158805752 0.1776421228 -0.0078776372 0.0276145415 0.0002303931 -0.0086226653 0.0322745732 -0.0051141072 0.0041493228 0.0155657345 -0.0008573274 0.0195998634 -0.0113345824 0.0097360210 0.0231493478 -0.0215842571 0.0162262348 -0.0172777231 0.0432968822 -0.0046822036 -0.0180970293 0.0474462326 -0.0126104993 0.0020539028 0.0242532408 -0.0073541091 0.0290187643 -0.0236961948 0.0129528560 0.0374201158 -0.0437990677 0.0253510382 0.0027146178 0.0562028947 -0.0406700487 0.0089218852 -0.0233029597 0.0042333021 -0.0016634596 0.0374812354 -0.0146247952 0.0027485085 0.0175942414 -0.0051105324 -0.0016847366 -0.0144685965 -0.0274269670 0.0098545367 -0.0037019113 0.0010540914 -0.0061460246 -0.0074734464 -0.0319672353 0.0047207469 0.0141082567 0.0017947835 -0.0178346752 -0.0173299097 -0.0574093212 0.0020477934 0.0207724752 0.0023718182 0.0215398460 0.0171078233 0.0321726965 0.0190204974 0.0271898709 0.0372982333 0.0343023326 0.0247491355 0.0535485355 0.0280378481 0.0436318871 0.0666343684 0.0070722933 -0.0037909898 0.0064500228 0.0111331533 -0.0038210438 0.0077360892 0.0019864139 0.0001896028 0.0081089144 0.0045948300 0.0021684329 0.0072386756 -0.0035849124 0.0017970164 0.0094135643 0.0007121279 0.0053646771 0.0075971539 0.0147678573 -0.0026235260 0.0062628598 0.0124284754 -0.0000579521 0.0056441653 0.0191651073 -0.0038346443 0.0056673594 0.0155331529 0.0007649157 0.0041996817 -0.0490749039 -0.0089613098 -0.0073020460 -0.0678051838 -0.0060213774 -0.0081969072 -0.0368110225 0.0139729302 -0.0032073963 -0.0606448208 -0.0144270895 -0.0092606472 -0.0249076459 -0.0556246782 0.0250544487 -0.0379599685 -0.0229235932 0.0474619669 -0.0168894230 -0.0700920135 0.0134607172 -0.0192675045 -0.0762012830 0.0524973564 -0.0011716816 -0.0194797125 -0.0149022763 -0.0022661602 -0.0119901544 -0.0009353653 -0.0012489187 -0.0155945965 -0.0100459794 0.0013327388 -0.0239398925 -0.0339189687 0.0012303444 -0.0182486163 -0.0146195525 -0.0031755939 -0.0191356538 -0.0086075872 0.0048015337 -0.0191233463 -0.0268278681 0.0048059411 -0.0003251626 0.0024171345 -0.0007191877 -0.0145929611 0.0012865941 0.0103291318 0.0050276316 0.0133549154 -0.0171202118 -0.0165256137 0.0005816888 0.0039481569 -0.0113250160 0.0110351576 -0.0082018834 -0.0059028996 0.0177686911 -0.0098099424 -0.0003463137 0.0183635780 -0.0035990499 -0.0013348026 0.0174121911 -0.0444077431 -0.0253505924 -0.0709865057 0.1319405321 -0.0465824105 0.0968817032 0.0941772955 -0.0414579030 0.0572050943 -0.0074555024 -0.0349446516 -0.0382529927 0.0954665081 -0.0451997878 0.0963364220 0.0418261867 -0.0331299717 -0.0368780972 -0.0072400015 -0.0318967167 -0.0784174007 0.0367723645 -0.0384639022 0.0374587226 0.1336152485 -0.0500971585 0.1676976598 0.0385375595 -0.0289374499 -0.0758426973 -0.0497342231 -0.0253351354 -0.1492675545 -0.0445912997 -0.0258855188 -0.0719376471 -0.0349819587 -0.0243363762 -0.0621082629 -0.0272045814 -0.0324667382 -0.0441486430 -0.0306412128 -0.0290199012 -0.0479913892 0.0255322028 -0.0497081502 0.0869543325 -0.0160645386 -0.0346083652 -0.0143815120 -0.0232184708 -0.0315622847 -0.0292674124 0.0049870277 -0.0418716430 0.0384906046 0.0128430916 -0.0451667213 0.0550944841 -0.0247141912 -0.0310719292 -0.0337288058 -0.0369379893 -0.0253825641 -0.0590489853 0.0112429619 -0.0427937640 0.0555387043 0.0267325598 -0.0504471774 0.0885712358 0.0504238955 -0.0582660346 0.1472803949 0.0134331641 -0.0332906900 0.0505980618 0.0148554983 -0.0121984293 0.0413769793 -0.0007121149 -0.0149112737 0.0005991085 -0.0387720050 0.0442783570 -0.0229801143 -0.0123469670 0.0192931749 0.0144874005 0.0459917898 -0.0697649862 0.1269231777 0.0130433818 0.0308627428 0.0570568919 0.1257741666 0.1060223015 -0.0080766280 -0.0765605080 0.0355358014 0.0429018791 -0.0182537178 0.0217771207 0.0669161953 -0.0319671574 0.0775228485 -0.0433780928 0.0069685829 0.0701887766 -0.0275615035 0.0114200037 0.0361576692 0.0171902453 0.1631108031 0.1745427174 -0.2130977765 0.2901030507 0.1636679845 0.1120462887 -0.1038327720 0.0173448180 0.0504084477 -0.0870841478 0.0620738590 0.0071471969 -0.0818143636 0.0188908136 0.0574027658 -0.0731450976 -0.0216537807 0.1004359652 -0.0459400438 0.0817005209 0.0387658982 0.0416134386 -0.0018380034 0.0696360955 0.1245109067 0.0670775749 -0.0026092561 -0.0227570986 0.1435447217 -0.1070661590 -0.0544388150 -0.0006629646 0.0298670751 -0.0018650866 -0.0198013267 -0.0079837967 -0.0028384537 -0.0081814258 -0.0115796175 0.0003264854 -0.0002709526 -0.0094659687 0.0046228973 -0.0045922136 -0.0038958246 0.0047648250 -0.0198307140 0.0031876978 0.0009285092 -0.0279701521 0.0016680894 -0.0049324369 -0.0023851663 -0.0185280942 0.0002250471 0.0126367021 -0.0154540532 0.0093465002 0.0133711660 -0.0098388987 0.0076471714 -0.0237037991 0.0080880609 0.0013086796 -0.0390103149 0.0057381077 0.0301933649 -0.0859342545 0.0142683503 0.0225535624 -0.0696834229 0.0051668592 -0.0145655526 0.0139749764 -0.0180297745 -0.0440939160 0.0830471788 -0.0340899926 -0.0387497291 0.0664394601 -0.0248818465 0.0555039890 -0.1510640293 0.0358520251 0.0431194730 -0.1168298388 0.0171372987 -0.0185656814 0.0271451671 -0.0259492689 -0.0710685832 0.1476497776 -0.0528705966 -0.0653319193 0.1216484080 -0.0370557670 0.0144831898 0.0181774172 -0.0116705043 0.0082025570 0.0245928274 -0.0134942766 -0.0407502057 0.1003826197 -0.0679464628 0.0008381787 -0.0360652258 0.0087670884 0.0010789365 -0.0112181364 -0.0061810228 0.0003936901 -0.0210679800 -0.0307875413 0.0071856475 0.0076454476 0.0363908415 0.0111746628 0.0159625930 0.0523355547 0.0097764266 0.0176413484 0.0613835204 0.0167943906 0.0332730116 0.0913851560 0.0023717013 -0.0179195626 -0.0286014059 0.0085092002 0.0012178005 0.0145064048 -0.0003707523 -0.0265172964 -0.0515632232 0.0117878934 0.0068808965 0.0216678824 0.0071549931 -0.0025434835 -0.0267955965 0.0035882998 0.0087585377 -0.0084414479 0.0049824341 0.0098599059 -0.0432158408 -0.0008884945 0.0338865537 -0.0353482355 0.0047089178 0.0011636333 -0.0602472716 -0.0037138059 0.0428791147 -0.0460367865 -0.0015642395 0.0341084153 0.0000760044 -0.0057485194 0.0464093006 -0.0130872115 -0.0030086016 0.0443348027 0.0190137333 -0.0122055008 0.0651172520 -0.0054527220 -0.0733879868 0.0755380491 -0.0556193544 -0.0780742459 0.0863241095 -0.0639685179 -0.0606811376 0.1047735518 -0.0699177498 -0.1122654222 0.0608727792 -0.0591526967 -0.0369794256 0.0173280614 0.0086637741 -0.0492358110 0.0221975234 0.0210390598 -0.0210826212 0.0057181878 0.0104802119 -0.0363584314 0.0116537116 0.0147629086 -0.0123176158 -0.0040558605 -0.0086592347 0.0019778701 -0.0070404769 0.0084965895 -0.0069183110 -0.0094875642 0.0008210338 -0.0272963038 -0.0061922094 -0.0035349475 -0.0219300285 -0.0051831460 -0.0153136255 -0.0180612249 -0.0045302888 0.0111661872 -0.0298634324 0.0050386095 0.0089050634 0.0048488887 0.0063268052 0.0147544220 -0.0102616845 -0.0022095089 0.0198942994 0.0232265861 0.0025309404 0.0158540409 0.0030524160 -0.0177940880 -0.0031819541 -0.0241133632 -0.0083559568 -0.0330179337 0.0055535396 -0.0115244096 -0.0499418555 -0.0169538289 -0.0122311371 -0.0788519231 0.0494893465 -0.0090776591 -0.0570139204 -0.0000587709 -0.0112390778 -0.0079368353 0.0821784188 -0.0419806589 0.0912061991 0.0656970961 -0.0340302310 0.0659066194 0.0211041124 -0.0173574925 0.0060849435 0.0708682654 -0.0381177865 0.0795931670 0.0359596691 -0.0204388641 0.0160360570 0.0157773636 -0.0135001844 -0.0105760517 0.0429050637 -0.0268488763 0.0405507528 0.0919983979 -0.0470499861 0.1161490303 0.0282044668 -0.0155367310 -0.0014974253 -0.0062884198 -0.0037117426 -0.0444050822 0.0047671737 -0.0139820646 -0.0076941899 0.0104116528 -0.0131278091 0.0021474807 0.0116100951 -0.0159064890 0.0135321749 0.0118900408 -0.0062784280 -0.0126564111 0.0348789722 0.0012842324 -0.0042648220 0.0232630061 -0.0003719292 0.0138201305 0.0119404374 -0.0086544974 -0.0353872509 0.0224370675 -0.0048829796 -0.0319595225 0.0346834658 0.0034995969 0.0182500750 0.0242388367 0.0007824246 0.0329385195 0.0049667198 -0.0121792456 -0.0515403583 0.0206356240 -0.0062103864 -0.0468198758 0.0438310683 0.0083714791 0.0405720812 0.0441202478 0.0043861456 0.0000640029 0.0327829020 -0.0230588403 0.0308316961 0.0283177145 -0.0088818879 -0.0152524606 -0.0041722601 -0.0077864178 0.0168273654 0.0244701357 0.0575369642 0.0075064931 -0.0096165317 0.0693145161 -0.0030443409 -0.0761437266 0.1602632952 -0.0732116524 -0.0274489808 0.0219960398 -0.0136770718 -0.1537074723 -0.0828984765 -0.0117590567 0.0439367654 0.0269178324 0.0029840115 0.0598405778 -0.0137339156 0.0201139322 -0.0011805827 -0.0082065012 0.0423939419 -0.0510657013 -0.0333161465 0.0809328015 -0.0321420175 0.0265431814 -0.0638422278 -0.1929388275 -0.1712770839 0.2258677545 -0.3270159567 -0.1820472733 -0.1669431805 0.0683894209 0.0434546254 0.0001590048 0.0537466121 -0.0047383541 0.0198105411 0.0329491625 0.0409042877 -0.0062048233 0.1362624092 0.0615913197 0.0318102887 0.1047126469 -0.1091962039 0.0519851246 0.0029513581 -0.0235956216 0.0031555524 -0.1539688981 -0.0018227328 0.0964868376 -0.0296072172 -0.1234373472 0.1418779812 -0.0051478804 -0.0018079973 0.0384215007 -0.0119857635 -0.0008663143 0.0018082081 0.0023462327 0.0409498920 -0.0284414454 0.0018340452 0.0405708324 -0.0207350580 -0.0133590230 -0.0038403754 0.0176018318 -0.0292688954 -0.0497765123 0.0557666149 -0.0296710880 -0.0497562221 0.0492982688 0.0143451729 0.0735450843 -0.0617029069 0.0120450656 0.0740021424 -0.0474392511 -0.0152693920 -0.0082256384 0.0157652253 -0.0430930803 -0.0878130470 0.0882563937 -0.0427078129 -0.0890731975 0.0780671196 0.0252890468 -0.0849024265 0.0269354068 0.0224458075 -0.0730611091 0.0115150553 -0.0056621444 0.0113257849 -0.0125028638 -0.0326493253 0.0855577922 -0.0240861388 -0.0333858556 0.0747150797 -0.0094880325 0.0461093605 -0.1525356898 0.0497957756 0.0397096534 -0.1241949033 0.0185610325 -0.0038867829 0.0203470325 -0.0278277900 -0.0538994766 0.1506013706 -0.0436368587 -0.0578936700 0.1357067430 -0.0174423227 -0.0138709336 0.0186339737 -0.0027136999 -0.0184043383 -0.0383015960 0.0315563423 -0.0117808509 0.0773276260 -0.0601833781 0.0054343713 -0.0284013469 -0.0088931463 -0.0114600885 -0.0175873958 0.0054084471 -0.0234711221 -0.0174730734 0.0020275663 -0.0022164307 -0.0277554837 0.0207651740 -0.0098330016 -0.0385994711 0.0308836080 0.0123565332 -0.0265941948 0.0248960494 -0.0030344890 -0.0447048079 0.0433061666 -0.0330502006 -0.0313895125 0.0087177967 -0.0248465005 -0.0411550362 0.0225078395 -0.0471355789 -0.0331321536 0.0019038707 -0.0306681108 -0.0494390483 0.0268694537 -0.0232262793 0.0203293143 0.0058680287 0.0058394221 0.0138310931 0.0031482389 -0.0306342437 0.0350651891 -0.0068662147 0.0086105649 0.0354243308 -0.0276626089 -0.0636501964 0.0421625827 -0.0037897267 0.0066128445 0.0430601099 -0.0373246092 0.0475476592 0.0144754234 -0.0186983484 0.0524692164 0.0224123179 -0.0380930398 0.0795500766 0.0070509933 -0.0206238727 0.0880111286 0.0191817737 -0.0576159284 0.0688707332 0.0152654081 0.0605233087 0.0985751565 -0.0266329802 0.0912418825 0.0464230729 -0.0236402372 0.0398438988 0.1000978894 0.0654807421 0.0912111379 0.0244606529 0.0774883340 -0.0176375840 0.0270990318 0.0395202372 -0.0360026952 0.0191309278 0.0898844001 -0.0048356759 0.0200443271 0.0974009967 -0.0437587833 0.0000593683 0.0066046208 0.0094423697 0.0008734394 0.0016371561 0.0008395495 0.0003967422 0.0036984603 0.0060348023 -0.0036677354 0.0128157628 0.0224196262 -0.0047894712 0.0050089576 0.0052279443 0.0091942448 0.0074546820 -0.0003849643 -0.0041722652 0.0116392965 0.0172316011 0.0073490997 -0.0005060948 -0.0031196329 0.0082177926 0.0084409663 -0.0010522608 0.0024257054 -0.0030758749 -0.0092365051 0.0298284025 -0.0016226919 -0.0154505609 -0.0083397557 -0.0062239513 -0.0243969300 0.0222538452 -0.0084426157 -0.0497647260 0.0050201705 -0.0245746626 -0.0827873984 0.0360815049 0.0049630787 -0.0486498830 -0.0594422890 -0.0448387556 0.0203326936 0.0120871878 0.0889694678 -0.1283480691 -0.0024042176 0.0589637392 -0.1000030732 -0.0346181385 -0.0238918660 -0.0169570648 0.0039556158 0.0492265072 -0.0077154415 -0.0231791568 0.0265255982 -0.1493820498 -0.0409731500 -0.0151557422 -0.1075124414 -0.0108639646 0.0077678576 0.0371385424 0.0213949722 0.0727847087 0.0364243631 -0.0245177064 0.0313647054 -0.2217288619 -0.0632173533 -0.0355430189 -0.1533900722 -0.0518496728 -0.0516294022 0.0097681445 -0.0442296977 -0.0481163154 0.0156185157 -0.0444908334 -0.0511655573 0.0421100438 -0.0154289401 -0.0325198524 0.0079815047 0.0570408066 0.0257729618 -0.0590196979 -0.0349107985 0.0252492247 -0.0398919073 0.0436836193 -0.0635399866 0.0305756168 0.0826312354 -0.0352224807 0.0004073093 -0.0005600306 0.0571064656 -0.0786945468 -0.0791646304 0.0494152337 -0.0533832847 0.0640442558 -0.1086606241 0.0723652983 0.1262309425 -0.0585099202 0.0184607949 -0.0199111729 0.1065785155 -0.1239222553 0.0831903870 0.0491505304 -0.0892745321 -0.0067817700 -0.0007961567 0.1227493499 -0.0118588538 0.0100826055 0.0558794066 0.0017815654 0.0134478004 0.0077450576 -0.0095336915 -0.0013669056 0.0453584166 -0.0101446862 -0.0028632997 0.0457603209 -0.0105509203 0.0002579913 0.0492435647 -0.0168313142 0.0251355034 -0.0092245401 0.0527462687 0.0517721223 -0.1170284322 -0.0560215813 0.0560233358 -0.0010735731 0.0180675078 -0.0147933724 0.0283325380 -0.0104065530 -0.0115308526 0.0511227937 -0.0273230051 -0.0091191737 0.0446342573 0.0088802329 0.0733821207 -0.1410470219 0.0631053965 0.0867145406 -0.1939264926 0.1477988669 0.0239811375 -0.0929439150 -0.0469893216 0.0631757402 0.0180034591 -0.0532841964 0.0465044466 -0.0069933647 -0.0668912514 0.0717246291 -0.0123789560 -0.0138187704 -0.0279288102 0.0948503984 0.0090657519 0.0082569854 -0.0085345508 0.0824937601 -0.0539602935 0.0251617421 -0.0793566914 -0.0090250888 0.0312050400 -0.0151766704 -0.0403730711 0.0774467636 -0.0015931147 0.0241800659 0.0203184016 0.0023527870 0.0089455401 0.0088816535 0.0120832256 0.0218012044 -0.0051930183 0.0118032598 0.0203579698 -0.0068521828 0.0027774957 0.0048800120 0.0050107775 -0.0057644086 -0.0059456911 0.0188721940 -0.0053213484 -0.0046692898 0.0212367598 0.0187172678 0.0305990664 -0.0133725800 0.0163200591 0.0289448547 -0.0156106430 -0.0011759499 -0.0110985854 0.0070818856 -0.0140756597 -0.0187711518 0.0284266973 -0.0116393753 -0.0161234725 0.0321080997 -0.0490499121 0.1295006895 -0.0149145717 -0.0413545474 0.1108609566 -0.0022393358 0.0032860736 0.0005115042 0.0275587296 0.0473872230 -0.0996105768 0.0517122810 0.0524916764 -0.1016927276 0.0442880934 -0.0855185632 0.2261538849 -0.0469638564 -0.0699220567 0.1779657730 -0.0192447510 0.0052584002 -0.0180594424 0.0364814614 0.0818063478 -0.1815777464 0.0762326655 0.0970323152 -0.1957619782 0.0644713788 -0.0051722351 -0.0048596396 0.0021674838 -0.0009316210 -0.0319044934 0.0164222764 -0.0568066216 0.1644096495 -0.0673639370 0.0693425415 -0.2193972865 0.1516032095 -0.0011176657 0.0009406224 0.0035125245 -0.0018936467 0.0100913509 0.0246788007 -0.0044038824 -0.0150088402 -0.0269451060 -0.0077913984 -0.0209470944 -0.0317956524 -0.0047018530 -0.0240930556 -0.0494682559 -0.0109758892 -0.0351261615 -0.0595676003 -0.0037486765 0.0077874914 0.0311041118 -0.0069038044 -0.0077489367 0.0021788260 -0.0029168880 0.0153607094 0.0508717339 -0.0092926974 -0.0112612875 0.0030741840 -0.0077729553 0.0066430903 0.0187506623 0.0088164713 -0.0057151151 0.0019980320 -0.0188493697 0.0077683464 0.0328221510 -0.0053447724 -0.0076261914 0.0225922354 -0.0348634417 0.0189036308 0.0492701214 -0.0127206922 -0.0072947291 0.0325828765 0.0250021107 -0.0234423399 -0.0106230482 0.0208399392 -0.0250227248 -0.0019186080 0.0412051987 -0.0358731295 -0.0281609162 0.0356133596 -0.0385576847 -0.0127785304 0.0030295868 -0.0136719547 0.0588343778 0.0041697455 -0.0172535992 0.0608845201 -0.0010591407 -0.0218438295 0.0616863214 0.0137619577 -0.0081705686 0.0609309005 -0.0143004929 0.0232953849 0.0056417108 0.0174829990 0.0234623455 -0.0167420661 -0.0424760964 0.0395280526 -0.0057724504 -0.0206986069 0.0300805943 -0.0037414562 0.0009417971 -0.0079722105 0.0036837273 -0.0039999577 -0.0027903130 0.0070177408 -0.0005984771 -0.0030543780 0.0067767562 0.0027688288 0.0042041912 0.0185975262 -0.0025513917 -0.0090409279 -0.0008852701 0.0141958676 0.0077539730 0.0076134848 0.0064967191 0.0079219705 0.0218245377 -0.0181805957 0.0236674903 0.0267905985 -0.0018951325 0.0152754458 0.0144939654 -0.0255306757 0.0262976494 0.0281151011 0.0502957380 0.0021318460 -0.0169039545 -0.0081964303 -0.0181798098 -0.0329842011 0.0240893964 -0.0259829368 -0.0549999194 0.0215579883 -0.0626212466 -0.0838108585 0.0210020634 -0.0160271873 -0.0515636679 -0.0881182299 -0.0179438281 0.0049999103 -0.0190358599 0.1092598703 -0.1481810486 -0.0268959551 0.0730213802 -0.1038502141 -0.0547613044 -0.0057514195 -0.0141513997 -0.0444242363 0.0784220893 -0.0490543611 -0.0112712285 0.0219455449 -0.0968239988 -0.0300960993 -0.0148266324 -0.0587610511 -0.0470449259 0.0318403133 0.0108743967 -0.0483290525 0.1143550691 -0.0403561001 0.0147445642 0.0104357148 -0.1207517785 -0.0236620385 -0.0512970376 -0.0622756799 -0.0774371149 -0.0259348174 0.0014184323 -0.0680518618 -0.0204122820 0.0126832235 -0.0679857799 -0.0241345827 0.0411305571 -0.0438348544 -0.0060885907 0.0097472716 0.0358110099 0.0396971214 0.0007354971 -0.0486806644 0.0410458270 -0.0010070637 -0.0005816342 -0.0289370141 0.0177329685 0.0419961224 -0.0077726100 0.0149385117 -0.0093278872 0.0647901830 -0.0090171244 -0.0835711937 0.0610069383 -0.0027988923 0.0057878543 -0.0612865007 0.0292508883 0.0770502213 -0.0273496625 0.0220119886 -0.0143832991 0.1021797726 -0.0199797435 0.0672048660 0.0564318542 -0.0027079287 -0.0371676921 0.0239030458 0.0881441029 -0.0429579570 0.0207453057 0.0397561992 0.0129423294 0.0010902625 0.0115351436 -0.0118929734 0.0126485853 0.0306755771 -0.0232109365 0.0169142754 0.0245339575 -0.0229055015 0.0167353015 0.0380845992 -0.0266013780 0.0336262801 -0.0089092234 0.0594442172 0.0665205237 -0.1432536642 -0.0750856974 0.0834177368 0.0061549526 0.0003587808 -0.0404084173 0.0617951697 -0.0329535512 0.0192059511 0.0097967214 -0.0495191347 0.0228396393 0.0017817815 0.0075967290 0.0835599301 -0.1658905575 0.0714754548 0.1155117665 -0.2428512218 0.1803679554 0.0392061975 -0.1065955967 -0.0725064421 0.0866666197 0.0320781575 -0.0743316171 0.0786896672 -0.0048867609 -0.0893788661 0.1027378653 -0.0078414831 -0.0286185050 -0.0459776814 0.1473134765 -0.0084239094 -0.0217768159 0.0528048303 0.0532445069 -0.1125914531 0.0414511100 -0.0355057354 0.0196020088 0.0011337635 -0.0589689354 0.0245580179 -0.0212038293 -0.0676288151 0.0278696770 0.0183336786 0.0022436313 -0.0082321411 0.0069639114 0.0144669189 0.0183516467 -0.0147358226 0.0170605318 0.0239926891 -0.0156149980 0.0088123055 -0.0007523345 0.0057221778 -0.0031919106 -0.0301154767 0.0318810173 -0.0059713444 -0.0349142179 0.0330728134 0.0208780652 0.0343110208 -0.0312127033 0.0229047781 0.0459292548 -0.0321679981 0.0077801570 -0.0066091692 0.0049217251 -0.0123607507 -0.0523098020 0.0503567594 -0.0143142532 -0.0611596523 0.0518937785 0.0696011917 -0.1123309803 0.0419017925 0.0747226325 -0.1228918361 0.0444827661 0.0411008297 -0.0444950800 0.0233190636 -0.0099213434 0.0577461504 -0.0073786825 -0.0277300548 0.0898844834 -0.0155654617 0.1014448351 -0.1847711199 0.0655514449 0.1045628107 -0.1884881372 0.0636808691 0.0530470864 -0.0614656724 0.0256832615 -0.0411490345 0.1161135898 -0.0245275923 -0.0751759152 0.1842335944 -0.0388561321 0.0064226111 0.0012698712 -0.0005327506 0.0071668602 -0.0203259631 0.0117638197 0.1327431688 -0.2706057034 0.1451195314 -0.0120068795 0.1312915044 -0.0900122293 0.0006743991 -0.0003258298 0.0059112484 0.0023690435 0.0055404278 0.0189292041 -0.0024633975 -0.0071427935 -0.0125618463 -0.0034665108 -0.0094003251 -0.0183144688 -0.0047466760 -0.0120522792 -0.0249106230 -0.0063001474 -0.0163606961 -0.0357619824 0.0023161768 0.0048804441 0.0182517017 -0.0009501844 -0.0028615914 -0.0009226535 0.0043495092 0.0082684753 0.0272693726 -0.0019958864 -0.0047989758 -0.0044601667 0.0042109045 0.0081083137 0.0244776232 -0.0124437529 0.0144637918 0.0292401571 0.0323407989 -0.0105159409 0.0154324951 0.0455944722 -0.0263776201 0.0054993393 0.0505086395 -0.0145860490 0.0136220326 0.0734565404 -0.0431558854 -0.0067740149 -0.0097980463 0.0026145946 0.0255962488 0.0222790721 -0.0190756478 0.0122258619 -0.0275657010 0.0078520928 0.0288439298 0.0302748114 -0.0301356113 0.0055095563 0.0048710098 -0.0043907719 0.0432806485 0.0107265699 -0.0100869038 0.0471076570 -0.0020772624 -0.0184167401 0.0462067520 0.0204401717 0.0034197305 0.0461130985 -0.0102653924 0.0423630833 -0.0015423191 0.0244287204 0.0493173061 -0.0225756579 -0.0443513073 0.0618465303 -0.0150413345 -0.0035094622 0.0426499009 -0.0045379690 -0.0018286879 -0.0095602851 0.0018256705 -0.0131296923 -0.0058517284 -0.0079880997 -0.0065148556 -0.0052664489 -0.0055756342 0.0089021233 -0.0092971977 -0.0069699391 0.0059126946 -0.0072551850 0.0080367280 -0.0006773950 -0.0083140336 0.0016949621 0.0118540802 -0.0132084244 -0.0090910779 0.0076780198 -0.0108251196 -0.0008646023 0.0063690534 -0.0122585084 -0.0001870390 0.0086430262 -0.0099644834 0.0009046151 -0.0202840544 -0.0039477879 0.0144269692 0.0084235632 -0.0040665764 0.0275623388 -0.0089592748 0.0127592631 0.0191549112 -0.0259836979 0.0257324095 0.0056778951 0.0067033112 0.0202903808 0.0183472947 0.0085534652 0.0150653987 -0.0340512474 0.0074940580 -0.0369417264 0.0382118311 0.0064149659 -0.0236185946 0.0189366918 0.0059484905 0.0079075903 -0.0244313857 0.0145786713 -0.0268227769 0.0052299623 -0.0054054592 -0.0036133175 0.0057138278 -0.0048776028 0.0121672457 -0.0159488945 0.0124874261 -0.0083347415 -0.0203892707 0.0214987565 -0.0416327041 0.0117203510 -0.0130648281 -0.0006335192 0.0144518236 -0.0109117449 0.0261642622 -0.0205157042 0.0088761425 0.0148307956 -0.0283452668 0.0031733695 0.0185240851 -0.0380340854 0.0092904555 0.0139270982 -0.0370544250 0.0011705927 0.0107891254 -0.0269540434 -0.0430901477 0.0045927672 -0.0775787124 -0.0270606942 0.0060174465 -0.0934680286 0.0142441409 0.0083439889 0.0279892793 -0.0078921027 0.0057898032 0.0037073666 -0.0507737179 0.0042369482 -0.1219817449 -0.0367178184 0.0070182317 -0.1386221363 0.0408463972 0.0057945681 0.0868438746 0.0010077194 0.0058538443 0.0421605620 -0.0770008380 0.0038660366 -0.1856059519 -0.0642349568 0.0040349261 -0.1061991558 0.0154728956 -0.0090192846 -0.0425201904 0.0178385289 -0.0084429327 -0.0189982409 0.0082090540 -0.0159285987 0.0005086235 -0.0407334573 0.0132787678 0.0057761814 0.0080159899 -0.0083152272 0.0321594019 0.0105251147 -0.0032879659 -0.0087358416 0.0009143985 0.0203175741 -0.0102301135 0.0109970931 0.0241394554 -0.0335628072 -0.0040878333 0.0459026314 0.0012549899 0.0065224419 0.0092853702 0.0015771966 0.0547180784 -0.0517922898 0.1301125951 0.0998310472 -0.1030305487 0.2189045624 -0.0584216655 -0.0175732576 -0.0178796559 0.0406670430 0.0269814270 -0.1287482644 0.0647601846 0.0684621096 0.0247652006 0.0078377199 0.0555692140 0.0208689447 -0.0006488134 0.0337811080 0.0018669090 -0.0170289033 0.0622036903 -0.0089975376 -0.0281237101 -0.0146667757 0.0358282015 -0.0075433033 0.0431129175 -0.0352881588 0.0624183874 -0.0036476522 0.0082721990 -0.2005760037 -0.0465257857 0.2139719858 0.2106974505 -0.2582750927 0.5042278596 0.3224968279 -0.0446223473 0.0131874505 0.0001151337 -0.0078735724 -0.0009726873 0.0023710297 -0.0030199759 -0.0046677487 0.0043918217 0.0015742582 -0.0072527887 0.0064668058 0.0028233975 -0.0080048545 0.0079187579 0.0043153145 -0.0102003189 0.0050271514 -0.0015550712 -0.0063649240 0.0015842070 -0.0039783741 -0.0033749382 0.0036524616 0.0023136928 -0.0068204683 0.0049165538 -0.0058781044 0.0013478079 0.0096921559 0.0068761745 -0.0121166024 0.0057602850 -0.0023794440 -0.0067622475 0.0189821348 -0.0373121731 0.0064623848 0.0154119307 -0.0316482883 0.0057158374 0.0038272436 -0.0098108272 0.0000067650 -0.0042355720 0.0054464979 -0.0053748481 -0.0031797047 0.0037493678 -0.0056124445 0.0274499908 -0.0552485883 0.0122921987 0.0206017797 -0.0411465433 0.0095452823 -0.0023455298 0.0034214296 -0.0020818282 -0.0126302129 0.0212904054 -0.0099187936 -0.0119939837 0.0196226682 -0.0105440419 0.0078137641 -0.0089582318 0.0046477445 0.0009373433 -0.0121893122 0.0082990582 -0.0029388064 -0.0084846950 0.0044276897 -0.0064692899 0.0268914759 -0.0111627803 -0.0030169359 0.0021201841 -0.0064623323 0.0056727066 -0.0010811461 -0.0118860932 -0.0078651160 0.0185024998 0.0004579916 0.0000407013 0.0315454912 0.0021704044 -0.0185353937 0.0214525431 0.0068845881 -0.0025348980 0.0439654246 0.0105033329 0.0139540648 0.0113457210 -0.0153670900 0.0103095583 0.0275463383 -0.0068168084 0.0241369306 0.0091169644 -0.0197255266 0.0164025118 0.0367899414 -0.0058671035 0.0154048489 -0.0148420170 -0.0103213727 0.0038741136 -0.0074604164 -0.0004675157 0.0192310953 -0.0162894217 -0.0132434497 -0.0016324239 -0.0040131247 0.0004249220 0.0342203595 -0.0237885185 -0.0229871176 -0.0021775456 -0.0026444760 -0.0010176454 -0.0181807916 0.0053823029 0.0142036248 -0.0244627463 0.0089451402 0.0175850358 -0.0330286949 0.0136018610 0.0242146632 -0.0451527115 0.0208951606 0.0312196489 -0.0890895310 0.0674224546 0.0058982982 -0.0830136526 0.0320578270 0.0326879033 -0.0721511465 0.1201778189 -0.0595521145 -0.1652805978 0.1008782904 0.0444132779 -0.0611307530 -0.0258226916 -0.0119667261 -0.0624047218 -0.0492835377 -0.0193209843 -0.0444427281 -0.0360688712 -0.0077932768 -0.0908969022 -0.0178727705 -0.0163321879 -0.0100803755 -0.0235171588 -0.0003150099 -0.0363716283 -0.0182374311 -0.0286390875 -0.0206641569 -0.0143033588 -0.0163792941 0.0132176531 -0.0166569498 -0.0031668856 0.0048190639 -0.0128650112 0.0285979405 -0.0068157101 -0.0132409915 0.0087917885 0.0242996266 -0.0279150706 -0.0096754786 0.0012708074 -0.0174993643 0.0109515519 0.0198545820 -0.0281554074 -0.0003644441 -0.0064857599 -0.0133741874 0.0144765238 -0.0553499745 0.0003736427 0.0388645685 0.0088430937 -0.0030175865 0.0756983810 -0.0313914327 0.0412718902 0.0445207858 -0.0660503312 0.0534982245 0.0073381587 -0.0130575746 0.0760824982 0.0533651636 -0.0085716310 -0.0044649163 0.0000866340 -0.0168472029 -0.0164531709 0.0098181844 -0.0083785823 -0.0166029470 0.0170296972 0.0087284952 -0.0141726470 0.0275278673 -0.0296595758 -0.0039688966 -0.0248886836 0.0220085836 -0.0284337601 0.0688181835 0.0326991894 -0.0287301725 0.0760258371 -0.0192741271 -0.0039404298 -0.0171476736 -0.0536550821 0.0061177537 -0.0669150211 0.0359938855 -0.0358463155 0.1009498829 0.0589871336 -0.0386537278 0.1173290455 0.0050882926 -0.0111969255 0.0182057183 0.0017504002 -0.0098046419 0.0167292796 0.0000845866 -0.0088648592 0.0167304380 0.0017563112 -0.0040053928 0.0033379531 0.0375313043 0.0051751638 0.0305214949 0.0077519578 0.0072803896 0.0177805787 0.0070904070 -0.0083926128 -0.0084531744 0.0271728555 -0.0045712860 0.0075149854 0.0258255752 0.0118538862 0.0306027379 0.0014278681 0.0117614393 0.0260528116 -0.0011888535 -0.0130319699 -0.0252630590 0.0354518154 -0.0101752068 0.0036871427 0.0320553268 0.0200652920 0.0460519568 0.0537723699 0.0074696132 0.0472046209 -0.0332521682 0.0066151918 -0.0535641556 -0.0340855818 0.0190726995 -0.0117531039 0.0426223577 -0.0571518705 0.0009803159 0.0156828715 0.0002081010 0.0060801905 -0.0229853966 0.0183465651 -0.0163352762 -0.0531606319 0.0570133123 -0.0211536995 -0.0278339558 0.0031682672 -0.0782731652 -0.0069526964 -0.0037178243 -0.1674240129 -0.0907055549 0.1131704427 -0.0381313526 0.1022779857 -0.1025940419 0.0211648169 -0.0448618167 -0.0075826027 -0.0423678022 -0.1044822545 -0.0082419102 -0.0476750368 -0.0413472005 -0.0122613439 -0.1641559048 0.0037459690 0.0214928693 -0.2314164509 0.0525026212 0.0101650548 -0.1286132853 -0.0889070745 0.1217281164 0.0496959904 -0.0914434695 0.1156793670 -0.0424366981 -0.1167547560 0.1766467361 -0.0841331731 0.1207596060 -0.0501322304 0.1584728259 0.1300113344 -0.1547298038 -0.0087845755 0.1630314334 -0.1903528208 -0.0043346159 -0.0437883721 -0.0064967271 -0.0290314507 -0.1402119773 -0.0071250744 -0.1347417316 -0.1734426727 -0.0148333583 0.0159893889 0.0010565968 -0.0116037374 -0.0194990461 0.0082913303 0.0092247775 -0.0335018034 0.0149889369 0.0250032033 -0.0378334684 0.0226067757 0.0226851085 -0.0335535224 0.0298677162 0.0275493409 -0.0432807195 0.0205307301 0.0096585185 -0.0365081831 0.0025621634 0.0057273354 -0.0301744800 0.0107589006 0.0293004976 -0.0353873445 0.0166375649 -0.0163984740 0.0108743997 0.0372814725 0.0327678656 -0.0458530102 0.0247509481 0.0047776815 -0.0387582988 0.0511709058 -0.0669296242 0.0075590287 0.0474321019 -0.0594110804 0.0100708880 0.0365745512 -0.0435248166 0.0061350410 0.0430030650 -0.0654118446 0.0071856945 0.0489321750 -0.0725876466 0.0058871772 0.0538118466 -0.0657869606 0.0068363153 0.0443396365 -0.0470779377 0.0095776462 -0.0044789804 0.0417983395 -0.0044580568 0.0353645970 -0.0582509048 0.0054282068 0.0498031034 -0.0763028290 0.0052286019 0.0280223579 -0.0357605455 0.0279466947 -0.0010056120 -0.0374764568 0.0369482555 -0.0637866834 0.1088539577 -0.0434908500 0.0154968392 0.0566297204 0.0219787699 -0.0129863626 0.0055581754 -0.0102924929 0.0049593409 -0.0009392263 -0.0217407749 -0.0236328767 0.0446307097 0.0095162745 -0.0062114529 0.0737417662 0.0123196470 -0.0476841447 0.0527518618 0.0276777648 -0.0111573418 0.1029103811 0.0352084533 0.0224537577 0.0241614910 -0.0381263688 0.0145295345 0.0612078552 -0.0172004308 0.0447386507 0.0168044141 -0.0543422690 0.0270813835 0.0797346847 -0.0204285411 0.0408305099 -0.0418738883 -0.0156143285 -0.0119096549 -0.0129039211 0.0194834344 0.0893904723 -0.0718646097 -0.0348891385 0.0362692436 -0.0531175359 -0.0022915441 0.1617833700 -0.1006443843 -0.0670102185 0.0693251828 -0.0701353760 -0.0215229699 -0.0858975335 0.0140454292 0.0650292552 -0.0698556910 -0.0007779939 0.0629119054 -0.1575702206 0.0466436215 0.0998176715 -0.1309828160 0.0254002548 0.1011201111 0.0467480817 -0.0320000487 0.0259679691 0.0827100245 -0.0643293531 0.0492490537 0.0270803710 -0.0634093972 -0.0031568728 0.0599436917 0.0059389480 0.0511069659 0.0258186299 0.0228999738 0.0133389335 0.0356858632 0.0496405254 0.0160352120 0.0047682109 0.0241500228 -0.0077606724 0.0413568739 0.0075538674 0.0313694821 -0.0034093289 0.0349641460 -0.0198218957 0.0068424156 0.0186161808 -0.0382657631 -0.0010964713 0.0238924465 -0.0258937225 -0.0113381722 0.0214372858 -0.0009507006 -0.0009162971 0.0387041723 -0.0032282414 -0.0266286868 0.0044047439 0.0072813619 -0.0267536457 0.0132882455 0.0039338776 -0.0394299509 0.0107413654 0.0104055961 -0.0193706053 -0.0102031933 -0.0053748331 -0.0337201136 0.0104640784 0.0120978884 -0.0237680104 0.0041113258 0.0095779312 0.0011016635 0.0417106741 0.0006484288 0.0149972267 0.0536757335 -0.0149562928 -0.0281202423 0.0898812502 -0.0455144237 0.0912050262 0.0571028084 -0.0293910401 0.1135456509 -0.0163567897 0.0789300110 -0.0719840781 -0.0112836773 -0.0449581148 -0.0490147162 -0.0008077256 -0.0394913694 0.0244845155 0.0135830617 -0.0033590231 0.0541905061 -0.0534964335 0.0704496778 -0.1235523182 0.0670638210 -0.1510258560 -0.0849465309 0.0750426760 -0.1273352446 0.0783075581 -0.0359632432 0.0687838270 0.1037519415 -0.1047673359 0.1420091596 -0.2004251119 0.1060938824 -0.2391740990 -0.1432769865 0.1257835160 -0.2071193244 0.0727247036 0.0072485330 0.0368286460 0.0624720652 0.0103467499 0.0241493495 0.0558403955 0.0194131805 -0.0024793493 0.0500866066 0.0041811462 0.0224922335 -0.0174899218 -0.0197465676 -0.0105581345 0.0486068904 -0.0241113091 0.0180193386 0.0198097897 0.0192668951 0.0105938073 -0.0150108980 0.0082505796 -0.0044701297 0.0143184271 -0.0366691551 0.0021240085 0.0729298170 -0.0375290316 0.0233788660 0.0158620769 0.0386501662 0.0040461297 -0.0398654597 0.0212522339 -0.0142102456 0.0126719360 -0.0593435203 -0.0025750540 -0.0446943594 -0.0280011401 -0.0256419924 0.1138915751 -0.0595912560 0.1191021892 0.1134702169 -0.0430976049 0.0339680756 0.0177909078 -0.0722205050 -0.0051489464 -0.0022008492 -0.0083719650 0.0193532033 0.0039385230 -0.0101036304 0.0241344326 0.0064058460 -0.0153191800 0.0366665468 0.0003681980 -0.0031958093 0.0303049399 -0.0503483667 -0.0304350590 0.0887905538 0.0288125243 -0.0474884028 0.0126987657 -0.0148208179 0.0646160606 -0.0339246792 -0.0031512210 0.0052461041 0.0070965315 -0.0150969978 0.0310390646 -0.0366733038 -0.0200586889 -0.0221608497 0.0880168510 -0.0559252485 -0.0761109533 0.1639037851 -0.1304809333 -0.0364506245 0.0464766424 0.0165472904 -0.0586369990 -0.0244494038 0.0260423077 -0.0295845183 0.0277733365 0.0666793188 -0.0768865918 0.0277587239 -0.0010671265 0.0594218125 -0.1058121265 -0.0121382897 0.0604113140 -0.0422780594 -0.0455908499 0.1323551395 -0.0108067007 0.0524358938 0.0054993655 -0.0523215423 -0.0407402721 0.0733572698 -0.1031961885 -0.0665545617 0.0349582664 0.0104891993 0.0006179974 0.0470664841 -0.0343531720 0.0035006074 0.0593112911 -0.0427208763 0.0003128242 0.0547641380 -0.0380956372 -0.0078612066 0.0399548675 -0.0262660878 -0.0031152405 0.0476345548 -0.0343248856 0.0000009916 0.0534307302 -0.0400899627 0.0050721939 0.0646807221 -0.0482254034 0.0020223174 0.0541932729 -0.0395985003 -0.0177931132 0.0033131182 0.0033425205 -0.0026787087 0.0434257132 -0.0298936380 -0.0004531445 0.0571119072 -0.0410392436 0.0395454578 -0.1181160665 0.0089544794 0.0486361875 -0.1440572245 0.0246395184 0.0325917988 -0.1400107849 0.0242408289 0.0363856326 -0.1533010016 0.0243537397 0.0257348268 -0.1170459258 0.0079276365 0.0362147120 -0.1129378162 0.0074451869 0.0524395705 -0.1369949317 0.0315664093 -0.0256176724 -0.0346938258 0.0122866005 0.0350237127 -0.1599210056 0.0259017280 0.0139252321 -0.1089065827 -0.0037602501 -0.0170181069 -0.0125133506 0.0142269875 -0.0253661990 -0.0146932378 0.0181520869 -0.0773497810 -0.0354095053 0.0118702379 -0.0215230087 0.0666342968 0.0047697457 -0.0064981759 0.0183314539 -0.0133417752 -0.0096324492 0.0192571033 -0.0062669207 -0.0061685458 0.0195718787 -0.0100341617 -0.0044355326 0.0242976230 -0.0000543385 -0.0078408439 0.0181576459 -0.0136678109 -0.0032349930 0.0255443373 0.0052489673 -0.0077683766 0.0232014477 -0.0035140481 -0.0063268008 0.0257432670 0.0025770879 -0.0064999770 0.0235478334 -0.0022775841 -0.0058189635 0.0271606053 0.0094989850 -0.0220412973 0.0042843634 0.0014545085 -0.0482808536 0.0153542589 0.0137776155 0.0270227756 -0.0267498698 -0.0182083234 0.0415402060 -0.0452977058 -0.0297049832 0.0610978789 -0.0371778433 -0.0267979402 0.0885512940 -0.0716847824 -0.0535825836 -0.0569908452 0.0075617217 0.0162367468 -0.0086155539 -0.0244021434 -0.0062680485 -0.0920967591 0.0209515358 0.0283465140 -0.0060351985 -0.0336726893 -0.0097887279 -0.0287491259 0.0156596696 -0.0112837753 -0.0448813779 0.0470152389 -0.0350016114 -0.0157244458 0.0362140674 0.0055316462 -0.0439653213 -0.0189571628 -0.0336997799 -0.0151944317 -0.0432704422 0.0205230651 -0.0500974744 -0.1197543039 0.0158646761 0.0261636640 -0.0409235674 0.0695541436 -0.0427126557 -0.0023070175 -0.0309078317 -0.0121339154 0.0203361932 -0.0505668810 0.0248256694 0.0254895031 0.0183259479 0.0056105104 0.0233564802 0.0103441992 -0.0395927728 0.0420286795 0.0347774013 -0.0358127445 0.0276844701 -0.0288042263 0.0174093997 0.0391758561 -0.0086737279 -0.0212036431 0.0482301714 0.0420862247 -0.0588392777 0.0506379964 0.0150130610 0.0243639688 0.0266781416 -0.0351103911 -0.0881324409 0.0535788413 0.0077406709 0.0574789672 0.0425861839 -0.0336235554 -0.0466182261 0.0296622595 -0.0771472715 0.0000533141 -0.0295682371 -0.0391150447 0.0633056338 -0.0834190588 0.0063838777 -0.0598863568 -0.0538757845 -0.0350251179 -0.0713320065 0.0050921222 -0.0551850467 0.0698398349 0.0007006264 0.0481846131 0.0436531361 -0.0018066788 0.0289434143 -0.0241146482 -0.0074887409 -0.0170437525 -0.0131782653 0.0262468745 -0.0220654052 0.0654342183 -0.0336824246 0.0572429705 0.0310283169 -0.0376360961 0.0325720612 -0.0439515442 0.0193548661 -0.0394667297 -0.0277648165 0.0520424390 -0.0379102440 0.1061743981 -0.0534575407 0.0947019279 0.0502713012 -0.0629600598 0.0553443438 -0.0510171171 -0.0069658598 -0.0351148725 -0.0357810993 -0.0119652928 -0.0165659446 -0.0344252954 -0.0149630619 -0.0014714294 -0.0267751975 -0.0071943897 -0.0147003155 0.0060519157 0.0097698142 -0.0144067176 -0.0219870768 0.0088930287 -0.0034732668 -0.0137467394 -0.0149311218 -0.0218848921 0.0018564156 -0.0067279744 -0.0240144303 -0.0050003587 0.0174857568 -0.0022621288 -0.0323771546 0.0156580794 0.0040912906 -0.0130734582 -0.0264587417 -0.0225631515 0.0103231720 -0.0126821829 -0.0299849806 -0.0014544679 0.0300738002 0.0067450841 0.0186956660 0.0163497245 -0.0153181137 -0.0696825537 0.0340132890 -0.0645366378 -0.0703461643 0.0278330018 -0.0384957456 0.0699957821 -0.0061073071 -0.0554012270 -0.0128538859 0.0112908492 -0.0158342739 0.0051123677 -0.0007635969 0.0014196493 0.0251705732 -0.0297687397 0.0163842694 0.0149761882 -0.0065326607 0.0482047681 0.0104461101 -0.0016001046 0.0830402991 0.0334777375 -0.0598980718 0.0238533823 -0.0640563776 0.0233880726 0.0206835299 0.0154028088 0.0134399647 0.0113473182 0.0561821507 0.0020834728 0.0352739335 0.0494741113 0.0219059593 0.0717759503 -0.0054376714 -0.0104144438 0.1430434427 -0.0283938062 -0.0291583717 0.0440512972 0.0396279916 -0.0581097826 -0.0119778571 0.0346850701 -0.0764606521 -0.0060509663 0.0122051146 -0.0917499247 0.0554859723 -0.0703453166 0.0018243703 -0.0403919315 -0.0788013032 0.0469692096 0.0654981379 -0.1113990494 0.0421682070 0.0186119631 0.0252154174 0.0110164668 0.0382518211 0.0771265133 -0.0005062430 0.0864163718 0.0965421367 -0.0118976629 -0.0017049214 -0.0129679000 0.0237124899 -0.0709287480 -0.0114036375 0.0713254688 -0.0935562758 -0.0134473165 0.0750445010 -0.0698621163 -0.0214829094 0.0206955424 -0.0178335135 -0.0240615400 -0.0299781883 0.0085680508 -0.0238265553 -0.0252793046 -0.0206470505 -0.0126530226 0.1036992846 -0.1318671674 -0.0105849948 0.1131690220 -0.0914047152 -0.0211844588 0.0183040839 0.0155532428 -0.0275369519 -0.0742289034 0.0509792293 -0.0290261304 -0.0671168752 0.0013970586 0.0911577100 -0.0023831435 -0.0338855760 0.0912422801 -0.0037026836 -0.0074982136 0.0751538001 -0.0106128021 -0.0028855910 0.0692163991 -0.0446903030 -0.0191502261 0.0760171517 -0.0374751084 -0.0437917153 0.1018380948 0.0235824026 -0.0445797166 0.0936970040 0.0153076911 -0.0003499002 0.0311628473 0.0576512345 0.0331784202 0.0520030739 -0.0596889792 -0.0125288632 0.0717507864 -0.0474794169 -0.0520287839 0.0027998451 0.0239688256 0.0187923430 -0.0432409008 0.0122732565 0.0390836006 -0.0525499966 0.0947922756 0.0101694035 0.0698102517 0.0851655681 0.0848475418 -0.0011638589 0.0145962697 0.0465044807 -0.0364316567 0.0125634550 0.0304440197 0.0245354050 -0.0228955408 0.0750521462 -0.0086237962 -0.0808003177 0.0408251358 0.0719773423 -0.0114480768 0.1073746199 0.0070520724 -0.1097239796 0.0502731941 -0.0765486882 -0.0536676151 -0.0152862097 -0.0601240130 -0.1029465608 -0.0225369679 -0.1257032971 -0.0666176749 -0.0562665313 -0.0896654284 -0.1523411467 -0.0736548390 -0.0122399708 0.0223839649 0.0399839940 -0.0796780461 0.0421026294 0.0523085191 0.1070539962 -0.0642051450 0.0114077860 0.1230430550 -0.1242251617 -0.0081233429 0.2088282783 -0.0879550422 -0.0008836230 0.2370144426 -0.1969308848 -0.0516521942 -0.1245937400 0.0074202789 0.0680027736 -0.0163240077 -0.0766537809 0.0380095862 -0.2217102094 0.0348219100 0.0831012706 -0.0278945562 -0.1076496673 0.0370945846 -0.0200005735 0.0196104464 -0.0118584755 -0.0283344395 0.0176150868 -0.0097238067 -0.0154279184 0.0290974033 -0.0116339201 -0.0249735825 0.0202628160 -0.0105697777 -0.0088925043 0.0078104601 -0.0071376701 -0.0077446261 0.0216323517 -0.0020175782 -0.0087412298 0.0037213568 -0.0126210290 -0.0018540060 -0.0012300024 0.0043388940 0.0404727708 0.0393391802 0.0523896310 0.0220433563 0.0299521188 0.0061304192 0.0278386091 0.0296820842 0.0058820242 0.0287841697 0.0112350627 0.0020227267 0.0309781114 0.0092483267 -0.0207774504 -0.0335306629 0.0050692194 0.0064900410 -0.0201948753 0.0067426957 0.0008699771 -0.0471006092 0.0232758329 0.0304600082 -0.0498653021 0.0141952963 0.0296816237 -0.0398518873 0.0226680656 0.0323108525 -0.0108129186 -0.0231659594 -0.0154233273 0.0178956361 0.0069786381 -0.0876340963 -0.0050006655 -0.0045748418 -0.0646146277 -0.0078218517 0.0392016498 -0.0358028105 -0.0226092258 -0.0431226764 -0.0728853766 -0.1077775135 0.0083712766 -0.0529175092 0.0803035105 -0.0004195056 0.0711189372 0.0469586967 -0.0024171615 0.0449027067 -0.0379759919 -0.0051580979 -0.0173463182 -0.0202036314 0.0305434338 -0.0141664912 0.0679144945 -0.0369425852 0.0702389103 0.0263478117 -0.0403756675 0.0379292786 -0.0589942381 0.0249403357 -0.0412161693 -0.0350034436 0.0596845601 -0.0291758043 0.1137692018 -0.0590307458 0.1119317514 0.0467467018 -0.0690433459 0.0612673169 -0.0772528918 -0.0104432537 -0.0357786702 -0.0559241283 -0.0259958980 -0.0079351377 -0.0505763532 -0.0330667314 0.0127150398 -0.0455741611 -0.0205785835 -0.0046480062 0.0166975734 0.0103129896 -0.0008399712 -0.0416566747 0.0099046001 0.0047332128 -0.0183543781 -0.0359371736 -0.0080402823 0.0130080287 -0.0209205880 -0.0097834583 -0.0094416745 0.0261928539 0.0076333988 -0.0637181392 0.0232708129 0.0109729071 -0.0154620573 -0.0576012161 -0.0047874541 0.0344007917 -0.0340186402 -0.0157906964 -0.0062961252 0.0511278023 0.0161341134 0.0406677974 0.0217551597 0.0003767163 -0.0854139941 0.0432566241 -0.0801091824 -0.0929816711 0.0376067517 -0.0671763922 -0.0169965010 -0.0471600177 0.0434281558 -0.0075452817 0.0088708609 -0.0090048632 0.0011713894 0.0036496300 0.0008059141 0.0131836186 -0.0159116930 0.0181798645 0.0089960747 -0.0037468320 0.0254459268 0.0090442196 0.0001736635 0.0443356070 0.0171642698 -0.0382337108 0.0121689734 -0.0286380381 0.0310490796 -0.0070126729 0.0035803975 0.0134608685 -0.0002698318 0.0246034901 0.0070571445 0.0133309486 0.0288938999 0.0157078814 0.0358767696 0.0004736938 -0.0035766391 0.0753107667 -0.0083158399 -0.0181860687 0.0222969965 0.0185067083 -0.0390016588 -0.0099284660 0.0181265880 -0.0424074901 0.0093722378 0.0191070890 -0.0578921291 0.0281551991 -0.0421292586 0.0082330210 -0.0465016846 -0.0405852905 0.0554228740 -0.0082462204 -0.0357808408 0.0603993656 0.0044316074 0.0188541209 0.0113946051 0.0171459224 0.0319644742 0.0103821937 0.0308300132 0.0386825627 -0.0050669254 0.0004992934 0.0418231879 0.0351056528 0.0925759067 0.0494912622 -0.0223441258 0.1114616265 0.0444642498 -0.0477823594 0.0893520277 0.0308174249 -0.0138997109 0.0502278614 0.0140340291 0.0290727890 0.0475780203 0.0271686070 0.0513869432 0.0700482064 0.0641358942 -0.0448713515 0.1405329695 0.0509546637 -0.0837047971 0.1000848491 0.0258032923 -0.0162464612 -0.0218555676 -0.0040362262 0.0516255635 0.0188439680 0.0219734585 0.0879064986 0.0604749727 0.0023684003 -0.1192662301 0.0481065367 0.0173612527 -0.1445421128 0.0405243530 0.0139961121 -0.1102162767 0.0286711480 0.0265082383 -0.1048482258 0.0441388685 0.0077008865 -0.0758106388 0.0509438871 -0.0100877494 -0.1342125635 0.0545937652 0.0160755231 -0.1548700022 0.0368633444 -0.0351064380 0.0182168033 -0.0304225437 0.0365448497 -0.0906147791 0.0381758233 0.0022127505 -0.0526094206 0.0516397950 -0.0285144308 -0.0110116431 -0.0419771075 0.0744541690 -0.0207955756 -0.0660442632 -0.0807339623 0.1011755836 -0.0785283602 -0.0404616484 0.0692236601 -0.0442604268 0.0212813360 0.0151334453 -0.0405842969 0.0416033308 0.0423631019 0.0385485919 -0.0120461665 -0.0009800256 -0.1629926898 0.0121732292 0.0437010685 -0.1261618130 -0.0606545032 -0.0450937392 -0.2764416497 -0.0115354023 0.0255207410 -0.2201874793 0.0818985425 0.1119410863 0.1268023366 0.0619552343 0.1156008632 0.0634687856 0.1348018652 0.1488130556 0.2302042015 0.0845929100 0.1571131159 0.1410644982 -0.0412890003 0.0146831936 0.0152098762 -0.0313934215 0.0130783782 0.0142733284 -0.0486056468 0.0173314637 0.0224313469 0.0011528394 -0.0072011346 -0.0091237152 -0.0815258502 0.0341197100 0.0456421183 0.0052217239 -0.0089635849 -0.0120419748 0.0199640165 -0.0148686043 -0.0194719553 0.0505471169 -0.0314141736 -0.0395484434 0.0424034124 -0.0272554734 -0.0345397003 0.1025586996 -0.0575426997 -0.0730045427 -0.0021595801 0.0055440472 0.0137440218 -0.0007545056 -0.0138267489 0.0287316676 -0.0045855345 0.0036936223 0.0047135041 0.0020489972 0.0263366254 0.0280791888 -0.0040211336 0.0109696213 -0.0084736468 0.0014172062 0.0186815160 -0.0085061647 -0.0085753395 0.0105116454 -0.0144771933 0.0010397639 0.0050719426 -0.0012501239 -0.0132378127 -0.0165973737 -0.0058864832 -0.0481435087 0.0688305242 0.1366885505 -0.0257868660 0.0524674732 0.0974635239 -0.0011228950 0.0024267334 0.0218946575 -0.0112331445 -0.0209812010 -0.0159960468 -0.0120458982 -0.0135494288 0.0354701745 -0.0004920083 -0.0102197382 0.0197391460 0.0341588057 -0.0459480369 0.0070624594 -0.0172195936 -0.0126029192 0.0460385029 0.0528405148 -0.0562815984 -0.0023452164 -0.0067245906 -0.0365433909 0.0277134553 -0.0167329046 -0.0197291600 -0.0442010317 -0.0148069740 -0.0451711086 -0.0111122288 -0.0087361684 -0.0302478929 0.0082537485 -0.0143296691 -0.0714419995 -0.0186797838 -0.0228826716 0.0025257858 -0.0135816280 0.0237006052 0.0038397863 0.0155964075 0.0144728293 0.0025912081 0.0093753875 -0.0084614649 -0.0006206829 -0.0039614426 0.0003351093 0.0090284881 0.0015937074 0.0163084459 -0.0055775946 0.0095073786 0.0047792635 -0.0075855665 0.0025834386 -0.0107816462 0.0066258531 -0.0046858756 -0.0000177896 0.0156582041 0.0042723990 0.0259486664 -0.0101011971 0.0143775334 0.0064162609 -0.0142437849 0.0026205034 -0.0164006967 -0.0014561931 -0.0079137897 -0.0088502140 -0.0046226201 0.0012824310 -0.0079403426 -0.0059238900 0.0066015154 -0.0077762823 -0.0033798258 0.0012131785 -0.0032401825 0.0032478300 -0.0099810170 -0.0031971984 0.0000377846 0.0122795730 -0.0092696756 -0.0039784392 -0.0127081617 -0.0072484280 -0.0007048499 -0.0192058507 -0.0005450834 0.0033258905 0.0073059670 -0.0021214430 0.0006211148 0.0243122653 -0.0114915300 -0.0043261244 -0.0181462547 -0.0045816596 -0.0039349407 -0.0299690568 0.0030776853 0.0058923215 0.0162578256 -0.0019152356 0.0055893767 -0.0147094331 -0.0162418205 0.0095794415 -0.0082326467 -0.0171630088 0.0009250202 -0.0094757757 -0.0357834608 -0.0035586240 0.0649536722 -0.0007240646 0.0016035499 -0.0033427012 0.0031381946 -0.0067373340 0.0087944749 0.0127568950 -0.0223990778 0.0355394032 0.0093585251 -0.0073512873 0.0287723457 -0.0018346719 -0.0105078512 0.0555655427 0.0192955860 -0.0302671740 0.0125605605 -0.0169486990 0.0049942696 0.0176335941 -0.0024156557 -0.0017479264 -0.0023296104 -0.0044191971 -0.0026781679 -0.0014489718 0.0150984651 -0.0080417646 0.0562292085 -0.0074597632 -0.0223863660 0.0879226878 -0.0323135264 -0.0137295190 0.0388025797 0.0352570100 -0.0189488246 -0.0003762467 0.0240027410 -0.0539304462 -0.0133172652 -0.0056724256 -0.0431818595 0.0295283066 -0.0031950285 0.0098507433 -0.0142183179 -0.0151213782 -0.0031978725 0.0495583561 -0.0565270965 0.0134572846 0.0126319566 0.0274375681 -0.0035934683 0.0050545601 -0.0157881009 0.0120684574 -0.0305099979 -0.0273509562 -0.0160263457 0.0198341413 0.0190965307 -0.0008048525 -0.0743525703 0.0643386716 0.0963163719 -0.1539025808 0.0859002243 0.1485433471 -0.1676198889 0.0817303464 0.0740901854 -0.0949625694 0.0680811983 0.0169187771 -0.0553208340 0.0446200851 -0.0181457831 -0.0512318789 0.0683179734 0.1260284536 -0.1875799970 0.0915758089 0.2190499870 -0.2072080156 0.0713708100 -0.0113844096 0.0131042997 0.0594316998 -0.0288539357 -0.0140939381 0.0378957899 -0.0899135890 -0.0159008211 -0.0437958491 -0.0198641172 0.0541800189 -0.0416336235 -0.0194888761 0.0333349935 -0.0281651850 -0.0024588422 0.0257069814 -0.0184289776 0.0130431838 0.0420697579 -0.0257952300 0.0082605315 0.0614608756 -0.0525050815 -0.0379719123 0.0616806874 -0.0469117041 -0.0319670660 0.0243404878 -0.0103398806 -0.0046125280 -0.0230600464 -0.0055325739 0.0260906435 0.0367600454 -0.0197402703 0.0170140180 0.0712909785 0.1077820894 -0.0529806862 0.0524863287 0.0249139644 -0.0591115500 0.0784327368 0.0328905650 0.0152388915 -0.0333606514 -0.0375724622 -0.0240325533 -0.0593646355 -0.0200107608 0.0792817724 0.0972219840 -0.0038743553 0.0505941637 0.0362813897 -0.0548507251 0.1224203414 0.0578344831 -0.0549822985 0.1029971864 -0.1147781479 -0.0950992707 0.1506964206 0.1246718293 -0.0804932302 0.1080529418 -0.1841492617 0.0082953487 0.0615547883 -0.0798620248 -0.0303039964 0.0728477943 -0.1909623016 0.0415310616 0.0483610885 -0.1068103331 -0.0324421749 0.0566877351 -0.3210670573 0.0012230000 -0.0221713585 0.0217239116 0.0477018278 -0.0510431719 -0.0077773947 -0.0667171576 0.0053585330 0.0709199587 -0.0926380256 0.0109995924 0.0877182970 -0.1117974449 0.0292553906 0.1009857210 -0.1660717943 0.0448858432 0.1371386237 0.0689001527 -0.0699473732 -0.0236839238 -0.0073432602 -0.0326407150 0.0307500178 0.1247066553 -0.1036982341 -0.0666479237 -0.0072793780 -0.0357626261 0.0300249217 -0.0061241355 0.0051884368 -0.0140665821 -0.0081977694 0.0132930382 -0.0202128051 -0.0040848082 0.0083074283 -0.0110842251 -0.0104904403 -0.0039178373 -0.0198888098 -0.0002558165 -0.0033171987 0.0033708174 -0.0059241361 -0.0061927026 0.0063715946 0.0069552415 -0.0064838447 0.0073692657 0.0001995356 -0.0020342101 0.0014477267 -0.0178561582 0.0237255908 0.0487643889 -0.0154907722 -0.0208735614 -0.0364233778 -0.0164575328 -0.0126575765 -0.0152720074 -0.0245207730 0.0110879227 -0.0004745060 -0.0287982900 0.0163354532 0.0354685170 0.0328880571 -0.0215585394 -0.0384102947 -0.0222956090 0.0105533421 -0.0062943808 -0.0721187740 0.0603812806 0.0256118203 -0.0291436873 0.0045878834 -0.0188120985 -0.0903723899 0.0828368601 0.0555317197 0.0931152453 0.0051101290 -0.0683587077 -0.0123084196 -0.0215599343 0.0476189686 0.0446784223 -0.0812152334 0.0745309497 0.1833698290 -0.2418753415 0.1385992412 -0.0724760471 -0.0152535849 0.1173483513 0.0792812922 -0.0056098027 0.0085147419 -0.0605378458 0.0028033604 -0.0688332093 -0.0273137455 -0.0025818088 -0.0327114520 0.0427035751 -0.0136806146 0.0348182911 -0.0079501289 -0.0104299712 -0.0311865071 -0.0004603130 -0.0041084739 0.0170748333 0.0337582748 -0.0095046315 0.0530084097 0.0293892854 -0.0183462403 0.0127321064 -0.0259762880 -0.0122504724 -0.0662927567 -0.0091034758 -0.0004866692 0.0231523848 0.0516122565 -0.0098180013 0.0836335371 0.0642402744 0.0053974211 0.0210595881 0.0371190025 0.0285906238 -0.0160569161 0.0340468851 0.0332190603 -0.0336965400 0.0251848629 0.0245464953 -0.0257249746 -0.0117325132 -0.0120439926 0.0231053770 0.0236238692 -0.0045007483 -0.0292857893 0.0030818260 0.0379610996 -0.0139676939 -0.0163121644 0.0199699556 0.0125007231 0.0052921449 -0.0243217326 -0.0026906506 0.0379417555 -0.0144941592 -0.0485782493 -0.0031997925 0.0610302582 -0.0252294944 -0.0313159031 0.0301352250 0.0252218334 0.0063610553 -0.0494333484 -0.0009794319 -0.0235428330 -0.0263518354 0.0477521131 0.0349730452 -0.0256328534 0.0383515336 0.0480621789 -0.0296704232 0.0772540628 -0.0258455298 -0.0165122943 -0.0298983440 -0.0051834247 0.0111853584 -0.0113270033 -0.0122900134 0.0115632906 -0.0159807509 -0.0150406380 0.0181311020 -0.0146455635 -0.0055311880 0.0000840481 -0.0258043046 0.0303789755 0.0237234115 -0.0559770767 -0.0023487943 0.0375272572 -0.0148483533 0.0155447854 -0.0692355932 0.0392787568 -0.0176490673 -0.0037763182 -0.0183535269 -0.0253418016 -0.0374034978 0.0350169611 0.0004135455 -0.0175639958 -0.0321522915 0.0400869673 0.0691249168 -0.1433020648 0.1023362113 0.0625028056 0.0069591005 0.0031333765 0.0428001218 -0.0025367174 -0.0001965950 0.0321376516 -0.0133387525 -0.0158720284 0.0619542480 -0.0331397078 0.0385586140 -0.0334505000 0.0948681735 0.0298874080 -0.1052281364 0.0869753364 -0.0048817931 -0.1396468831 0.0036660171 -0.0589719028 -0.0048116958 0.0682190038 -0.0164102315 -0.0764486398 0.0607364966 -0.0069466789 -0.0576355875 0.0186360140 0.0161465920 0.0775711133 0.0322983397 0.0575219958 0.1237695390 -0.0230235122 0.0700316302 0.1494588527 -0.0670754517 0.0366701764 0.1142965756 -0.0447697544 0.0161464268 0.1112207886 -0.0201397094 0.0118600610 0.0964221700 0.0140933654 0.0692798188 0.1255251734 -0.0220479740 0.0894772067 0.1665996652 -0.0956370104 0.0015753677 -0.0105038380 -0.0041512273 -0.0034778032 0.0965527999 -0.0125612703 -0.0072062551 0.0825985137 0.0386362383 -0.0327191554 -0.0234494199 -0.0356636371 -0.0316925312 -0.0306891384 -0.0296966432 -0.0406211749 -0.0474098110 -0.0254046139 -0.0306020773 -0.0585448396 -0.0179052363 -0.0293792338 -0.0471169331 -0.0220797158 -0.0466616078 -0.0098814574 -0.0395615327 -0.0299836549 -0.0181560306 -0.0238480195 -0.0590867223 -0.0309997648 -0.0180139646 -0.0216503101 -0.0693359240 -0.0157399641 -0.0318627105 -0.0609101628 -0.0297735573 -0.0380830794 -0.0601811506 0.0177636960 0.0120141296 -0.0875853938 0.0197258559 -0.0848473457 -0.0274810371 -0.0209385479 -0.0517177995 -0.0158440420 -0.0084762465 -0.0223872590 -0.0222985419 -0.0405201387 -0.0239232361 -0.0019601026 0.0027189553 -0.0234279098 -0.0422313943 -0.0699078149 -0.0174969539 -0.0214251783 0.0081137330 -0.0253696893 -0.0674240647 -0.1324019109 -0.0148743912 -0.0312818268 0.0033164514 -0.0176063752 0.0147160439 0.0778580533 -0.0108046809 0.0137795795 0.1018620293 -0.0134523043 0.0320304616 0.1219418764 -0.0014769396 0.0354955854 0.1791639403 -0.0591641510 0.0544090226 0.0072233752 -0.0583620237 0.0610875111 0.0133120404 -0.0514920095 0.0715185057 -0.0304819304 0.0475501955 0.0538517706 -0.0894796088 -0.0981364055 0.0774937664 -0.0329067669 0.0852460033 0.0433968242 -0.1263269998 0.0224265331 0.0584434951 -0.0296400441 0.0960909263 0.0377272898 -0.1032248140 0.0544026469 0.0596900525 -0.0150622503 0.1836486824 0.0121049406 -0.1552948174 -0.0288976866 0.0326126155 -0.0453192763 0.0212991077 -0.0019972317 -0.0210617890 -0.0308366865 0.0530306218 -0.1335235216 -0.1048341639 0.0683396457 -0.0054641233 0.0022918643 0.0045739587 0.0195187559 -0.0025295260 0.0358534138 0.0345643801 0.0023295317 -0.0054140084 0.0060620370 0.0175619100 -0.0135794618 0.0415636004 0.0378570650 0.0312647846 -0.0764871529 0.0622677747 0.0699451682 0.0337385811 0.0491961509 0.0632688176 0.0149298142 0.0237274683 0.0420039105 0.0037588367 0.0406491230 0.0416463194 -0.0529317815 -0.0060101358 0.0384441392 0.0109276127 -0.0156340808 0.0478806219 0.0215251941 -0.0394468709 0.0324148033 -0.0005652217 -0.0444922389 0.0413504570 0.0049926285 -0.0312643153 0.0252337516 -0.0091314964 0.0290694690 0.0372911939 -0.0063681084 0.0323196953 0.0682698737 -0.0606372418 0.0249511155 0.0172003467 0.0342743003 0.0897277815 0.0419094464 0.1317176475 -0.0417742730 -0.0639271935 0.0207476544 0.0568327446 -0.0117443585 0.0248059336 -0.0367089513 0.0163331986 -0.0609950902 -0.0143284642 0.0074533873 -0.0294501618 0.0306706427 -0.0127940877 0.0322708616 0.0043111085 -0.0018126647 -0.0082382853 -0.0018955779 0.0041525864 -0.0072326405 0.0211746635 -0.0070664057 0.0275233297 0.0260716855 -0.0134269139 0.0271051215 -0.0035978559 -0.0003191891 -0.0222574555 -0.0109397752 0.0090066688 -0.0177135600 0.0295042832 -0.0103002876 0.0406982799 0.0414622248 -0.0016572506 0.0222853097 0.0163136495 0.0163042818 -0.0106364125 0.0144167768 0.0189725045 -0.0233574152 0.0069055669 0.0169575508 -0.0250897222 -0.0035457781 -0.0059960829 0.0274967526 0.0045998067 0.0021981098 -0.0305723181 -0.0032245322 0.0245625937 -0.0122465676 -0.0078591916 0.0126087024 0.0169962239 -0.0005445287 -0.0106436298 -0.0032085318 0.0090406339 -0.0021086138 -0.0490095503 -0.0074723430 0.0364736711 -0.0201018644 -0.0156925460 0.0197608491 0.0333621625 0.0000305490 -0.0247027711 -0.0023965395 -0.0042188611 -0.0159400547 0.0552948199 0.0302219508 -0.0195044792 0.0539083597 0.0373799830 -0.0295016708 0.0462031815 -0.0293177954 0.0047825609 0.0046207505 0.0022016048 0.0086307624 -0.0066556183 -0.0111584684 0.0240316424 -0.0310930775 -0.0241715288 0.0450551650 -0.0565000789 -0.0064695942 0.0017347710 -0.0468185957 0.0443200151 0.0457701645 -0.0492566080 -0.0250427119 0.0263482637 -0.0331987976 0.0290352586 -0.0696010514 0.0203389128 -0.0139534208 0.0090265921 -0.0294310934 -0.0124272162 -0.0286776047 0.0321124577 -0.0429117699 -0.0625178580 0.0122078201 0.0760879022 0.1260426460 -0.2493693226 0.1855359185 0.1541879877 0.0979253098 -0.0321375069 0.0217935326 -0.0122675293 -0.0278863775 0.0324773347 -0.0342795981 -0.0286172103 0.0385925865 -0.0419931058 0.1276860771 0.0279456588 0.0378405537 0.0793492286 -0.1871051173 0.1309871429 -0.0846017950 -0.1276634754 -0.0302979420 -0.0817222708 0.0092808384 0.0635891035 0.0112154742 -0.0842485742 0.0951893177 0.0351895111 -0.0420261334 -0.0112585565 -0.0067469765 -0.0350783869 -0.0676559814 -0.0468991250 -0.0715820179 -0.0197433777 -0.0698724700 -0.1142649694 0.0392071118 -0.0538813090 -0.1132743403 0.0458663975 -0.0429493257 -0.1357056208 0.0426801253 -0.0287750994 -0.0963661834 -0.0117071198 -0.0510017847 -0.0512260860 -0.0436325707 -0.0823247658 -0.1217863727 0.0553901508 -0.0202831465 0.0127389322 0.0150837565 -0.0377158474 -0.1567762297 0.0649234010 -0.0193422094 -0.0998374258 -0.0198210611 -0.0189957096 -0.0411207643 0.0072988476 0.0011942082 -0.0838049297 0.0143825124 0.0032472950 -0.0931223196 0.0152908840 0.0125092200 -0.0918178282 0.0257055415 -0.0099300916 -0.0428888170 0.0182000533 -0.0365924623 -0.0310962778 0.0051229781 0.0030638766 -0.0857293888 0.0166881460 -0.0315091979 -0.0197205579 -0.0136851629 0.0279259464 -0.1038578852 0.0277305748 -0.0163775913 -0.0338476393 0.0130642435 0.0295697618 0.0695758366 -0.0086504949 -0.0388647869 0.0906820878 -0.0011719701 -0.0647166107 0.0173999613 -0.0352772071 -0.0336170822 0.0263555384 -0.0221483671 0.0505871405 0.0625305383 0.0588581836 0.0320772376 0.0422511023 0.0176745413 0.0636434297 0.0496734826 0.0767352854 0.0368541450 -0.0096162875 -0.0336976787 0.0903134008 0.0741566254 0.1393467530 0.0382024945 -0.0298269015 -0.0559247289 0.0078476162 -0.0013893486 -0.0584954192 0.0055554782 -0.0412256619 -0.1207204106 -0.0207932732 -0.0128921559 -0.0888385718 -0.0199118914 -0.0892410649 -0.2183429840 -0.0435110255 0.0441416949 0.0346400357 -0.0245146692 0.0180059385 -0.0030529370 -0.0725914776 0.0444681227 0.0726493024 -0.0423164173 -0.0013253055 0.0480392845 -0.1095710235 0.0719911893 0.1125428059 -0.0623310675 -0.0036824517 0.0804392422 0.0329607458 -0.0416720523 -0.0484298951 0.0340676452 -0.0548011251 -0.0291337621 0.0778654510 -0.0775007019 -0.0996301472 0.0853840555 -0.1022459206 -0.0670254270 0.0013590526 0.0115517661 -0.0001671520 0.0556726430 -0.0473576303 0.0424898759 -0.0098039115 0.0140551529 -0.0889617743 -0.0480241511 0.0757903992 0.0556900884 0.0097169141 0.0108779628 0.0128670526 0.0062640449 0.0345335509 0.0246665356 0.0060003841 0.0071028375 0.0037367373 0.0235370906 -0.0034453148 0.0295022215 -0.0034991672 -0.0027655961 0.0057875081 -0.0043968895 -0.0089066673 -0.0083325918 -0.0038316296 -0.0072486717 -0.0039673311 0.0000866546 -0.0041855662 -0.0002238531 -0.0007967374 -0.0018166138 0.0092890595 -0.0010980037 -0.0029145235 -0.0001646916 0.0025733952 -0.0054083612 -0.0025155560 0.0058556360 -0.0047327008 -0.0012770366 0.0024422873 -0.0034110727 0.0008707440 0.0061090354 -0.0046843165 -0.0010784784 -0.0050568490 -0.0009351127 0.0022967725 0.0021437541 -0.0054926910 0.0168158366 0.0007311805 0.0086728119 -0.0032754597 -0.0129487449 0.0049683610 -0.0233074694 0.0146207745 0.0278356462 0.0001816084 -0.0100644284 -0.0001495898 -0.0035420823 -0.0048367772 0.0030856292 -0.0094371263 -0.0035074249 0.0009825695 -0.0054006579 -0.0026893068 -0.0021446306 0.0003440270 -0.0040889699 0.0011877637 -0.0034297393 -0.0003413807 -0.0020974265 -0.0008194539 0.0002286843 -0.0037950672 0.0020477100 -0.0021059830 -0.0010485929 0.0010293796 -0.0056763018 0.0031437357 -0.0057891623 0.0011568406 -0.0027953880 -0.0003785667 0.0017876047 -0.0055583436 0.0041136234 -0.0084879068 -0.0013662328 -0.0040542329 -0.0097496685 -0.0005347772 -0.0054221442 -0.0061498856 -0.0042693334 0.0005984012 -0.0106321334 -0.0000433112 -0.0076475864 0.0016927094 0.0031819122 0.0021893399 -0.0110434359 0.0045904871 -0.0082552464 -0.0058643398 -0.0023575964 -0.0049034422 0.0008927584 -0.0010870253 0.0003046732 -0.0046800646 0.0063480871 -0.0033900611 -0.0159067264 0.0070938371 -0.0111570991 -0.0058400775 -0.0056212752 -0.0054676219 0.0054569687 -0.0033683518 0.0034076620 -0.0047770127 0.0099888390 -0.0034585025 0.0071254570 0.0041127369 0.0072983399 -0.0009911313 -0.0012863890 0.0030308991 -0.0024380661 0.0037248007 -0.0005219637 0.0008226086 -0.0015965785 0.0033858447 0.0035924175 0.0115699411 0.0045846819 -0.0014972960 0.0119301461 0.0029218748 -0.0002391612 0.0090822134 0.0109781805 0.0091413358 -0.0113207967 -0.0045760474 0.0399326921 0.0135488157 0.0020941336 0.0240087733 -0.0549354238 -0.0226594783 -0.0392704805 -0.0210007371 0.0035628230 -0.0058834858 0.0069333179 -0.0019286204 -0.0098932718 -0.0115629040 0.0279950672 -0.0075419313 -0.0290623353 0.0222606466 0.0568910950 0.0500903129 -0.0976401916 0.1162238135 0.0506412592 0.0651383669 0.0065570831 -0.0713992654 -0.0684301490 0.0196673366 -0.0368061094 -0.0149360763 0.0550659051 -0.0924726693 0.0004567514 0.3105419983 0.2416214302 -0.2643479774 0.1046118896 -0.3712511508 0.4177866862 -0.5885936773 0.0231868144 -0.0983686348 0.0098937035 0.0047913219 0.0537602061 -0.0175350387 -0.0147045472 0.0098230261 -0.0259298425 -0.0392771554 0.0432086364 -0.0010935705 0.0026656476 0.0026478331 -0.0006138330 0.0023780007 0.0022501724 0.0001685978 0.0041270149 -0.0013594119 0.0000135976 0.0080133924 -0.0052919378 0.0021861265 0.0148451298 -0.0105631228 0.0016502066 0.0125661424 -0.0068694841 -0.0017187293 -0.0016413062 0.0067010738 0.0001729250 0.0007028234 0.0002615633 -0.0022154616 0.0005938624 -0.0014718040 0.0043566527 0.0207334051 -0.0155566146 0.0020710296 0.0179511998 -0.0094551097 0.0004220337 -0.0003369726 0.0033047676 -0.0007899294 0.0020382238 0.0022258175 -0.0000573420 0.0031335956 0.0018096829 -0.0002619182 0.0036054605 0.0018382908 0.0002776044 0.0013443322 0.0026708621 0.0015804820 -0.0021495096 0.0039116011 -0.0012916507 0.0021555618 0.0017253824 0.0024253128 0.0004012729 -0.0001254798 -0.0008478906 0.0047895964 0.0015460898 0.0007038859 0.0016951283 0.0032933718 -0.0039234129 -0.0039618305 0.0011064965 -0.0023295667 -0.0029510098 0.0000886022 0.0062926380 0.0011386130 -0.0004475212 0.0010956811 -0.0032055895 -0.0016239689 -0.0033852226 -0.0066718886 -0.0055754346 -0.0012595391 -0.0059342453 -0.0042882076 -0.0033942338 -0.0039775371 -0.0019717552 -0.0010687600 0.0009838551 0.0075575981 -0.0045827974 -0.0044435842 -0.0032143983 -0.0004851746 0.0046977059 0.0140846305 0.0000744933 -0.0036805362 -0.0007947353 0.0008512995 0.0009174271 0.0078212383 0.0012839136 -0.0039199000 -0.0014610735 0.0028685618 0.0045899430 0.0142366657 0.0060392554 -0.0059031992 -0.0044616172 0.0055909957 -0.0041944834 -0.0017980383 0.0058050275 -0.0043859335 -0.0063905959 -0.0005640197 0.0017032101 -0.0018404632 0.0082467224 -0.0066407979 -0.0099418253 -0.0026705461 0.0038894587 -0.0024109231 -0.0003927279 0.0017038307 0.0028287388 -0.0054508654 0.0056302390 0.0040977828 -0.0027836773 0.0041115562 0.0065110336 -0.0123106038 0.0112807356 0.0090050195 0.0112532211 0.0048852196 0.0148911271 0.0328881337 -0.0212457154 0.0338934527 0.0037793890 -0.0011873523 -0.0161053588 0.0016477838 0.0339180397 0.0378721402 0.0074035586 0.0203779942 0.0063066845 0.0127208623 0.0321138711 0.0074128533 -0.0001712994 0.0199369535 -0.0020659247 0.0143401950 0.0143120486 0.0128705994 0.0051522420 0.0035728774 -0.0001609820 0.0029293398 0.0162292449 0.0251171703 0.0039714388 0.0116105550 0.0132486588 -0.0055122942 0.0059791855 0.0001494723 -0.0065381582 -0.0032283669 -0.0204014036 -0.0007519416 0.0067681254 -0.0012153823 -0.0063416784 0.0094935228 0.0024228636 -0.0088364432 0.0082524420 0.0006345434 0.0026947609 0.0058873082 -0.0055870112 -0.0105303208 0.0077166296 -0.0010579875 -0.0040230892 -0.0016276791 -0.0013346852 -0.0151086652 0.0043789413 -0.0422947161 -0.0222474561 -0.0289725675 0.0068878642 0.0044748301 -0.0153679565 0.0505025413 -0.0555783217 -0.0756960669 -0.0015801336 -0.0080054106 0.0320029373 -0.0236986809 0.0744723845 -0.0405427315 0.1457343510 0.0371769891 -0.0095064571 0.0707749638 -0.0219775275 0.0449763186 -0.0607016265 0.0375025942 -0.0087437183 0.0482410612 -0.0202831802 0.0320341861 -0.0194894618 -0.0507868784 0.0606506783 -0.0838450847 -0.0079583850 0.0290963224 -0.0421766183 0.0715582219 -0.0367911345 0.1016900592 -0.0329923654 0.0379014776 -0.0268518923 -0.0837632403 0.0887538299 -0.1287014605 0.0033997262 0.0251053571 -0.0202914311 0.0453325429 -0.0125908232 0.0308060223 0.0448687460 -0.0108417179 0.0269295767 0.0514861237 -0.0216477025 0.0575707757 -0.0017713201 -0.0152803696 -0.0481606742 0.0524019734 -0.0300392609 0.0564063560 0.0376951799 -0.0171963015 0.0336356984 0.0087699069 -0.0120931083 -0.0229626699 0.0256530768 -0.0256489465 0.0039906461 0.0648351871 -0.0349221064 0.0749944328 0.0416401349 -0.0152701506 0.0439784739 -0.0080242489 -0.0062976177 -0.0522961845 0.0214310609 -0.0287020584 -0.0062873250 -0.0298915571 -0.0100838010 -0.1037553892 -0.0188384860 0.0368038217 -0.0875447316 -0.0151212176 0.0169401288 -0.0406916500 0.0062322474 0.0099892289 -0.0148471787 0.0022855592 -0.0280871252 0.0172320421 0.0300238938 -0.0285918499 0.0239574694 -0.0003204435 0.0110444658 -0.0024406691 -0.0062656274 0.0398915366 -0.0042570042 -0.0288797309 0.0202151261 -0.0272449044 -0.0186401990 0.0622958987 0.0048451671 0.0643372796 0.0235701309 0.0120037884 0.0346192400 -0.0807513587 0.0528850036 -0.0865843597 -0.0102987933 -0.0804046978 -0.1285503983 -0.0456086511 -0.0000992292 0.0201297398 -0.0016107183 -0.1503311153 0.0207591102 0.0954990953 0.0522613580 -0.0007106701 0.0762216895 0.0293592368 -0.0136407042 0.0407141061 -0.0038086770 -0.0457260594 0.0812659168 -0.0040554090 0.2407891337 0.1745596984 -0.0506782392 0.1541955180 -0.1740080562 0.1265006482 -0.1250809292 0.0480430065 -0.0194130401 0.0332694233 -0.0743719655 -0.1315250579 -0.1584924844 0.0345935456 -0.2597354361 -0.2268190157 0.0628877696 0.0474516453 0.0068844593 -0.0014065466 0.0098406528 0.0097697525 -0.0063234121 0.0103237866 0.0108591230 -0.0076289540 0.0105221025 0.0115911013 -0.0100994086 0.0131554316 0.0042197593 -0.0176786181 0.0239299362 0.0048496728 -0.0144918404 0.0223855818 0.0132948838 -0.0037002603 0.0076896285 0.0108957452 -0.0041077688 0.0089948815 0.0138833649 -0.0050449927 0.0002816000 -0.0020662185 -0.0254801774 0.0292541459 0.0037251573 -0.0228901234 0.0267989177 0.0065445110 0.0180582910 -0.0141132185 0.0060252724 0.0206829735 -0.0117199447 0.0043657944 0.0180807822 -0.0098744361 0.0020260633 0.0151405119 -0.0136652655 0.0046838640 0.0123908543 -0.0158407401 0.0086608289 0.0215408080 -0.0156698752 0.0073962091 0.0191841663 -0.0110152905 0.0060415743 0.0046930349 0.0081381170 0.0010101350 0.0105985894 -0.0120284630 0.0053251865 0.0092241272 -0.0160147579 0.0077113685 0.0017273115 -0.0062188164 0.0207296350 -0.0069383890 -0.0052717779 0.0022502853 -0.0136605308 0.0183548382 0.0123023367 0.0060231386 0.0167465820 0.0019323414 0.0090301041 0.0069371372 -0.0018590430 0.0117944507 0.0130224890 -0.0011872986 0.0003632076 -0.0132645780 -0.0034727568 -0.0037976499 -0.0203174719 -0.0029845183 -0.0049586870 -0.0265636837 -0.0060498509 -0.0138484206 -0.0409078283 -0.0010088665 0.0140512399 0.0208569782 -0.0029632559 0.0057704630 0.0040122688 0.0014607621 0.0183014231 0.0320541022 -0.0042834376 0.0039995166 0.0061084845 -0.0090829415 0.0089296768 0.0048720372 -0.0132119926 0.0096126413 0.0047648445 0.0008367436 0.0011462101 0.0034965513 0.0117503828 -0.0095044980 -0.0043465674 0.0053652311 0.0017351130 0.0064772997 0.0247412806 -0.0176159756 -0.0096147825 -0.0114668613 0.0030737371 0.0021137093 0.0048130721 -0.0082711593 -0.0044256053 -0.0179560811 0.0040933317 0.0015279332 0.0117957069 -0.0157032335 -0.0098161771 -0.0599818579 0.0414665701 0.0474102780 0.0406998961 -0.1113667027 0.1598769390 -0.0602857791 0.1039940021 -0.1810937034 -0.2243785217 0.2045971061 0.1960571112 -0.0361184101 -0.1027241030 -0.0043676581 -0.0659327245 -0.1899227976 -0.0169199572 0.0154382621 -0.1146177806 0.0361846131 -0.0996584239 -0.0586829116 -0.0508416476 -0.0007876527 0.0058519951 -0.0023581553 0.0056404783 -0.0001500299 -0.0062558738 0.0010427654 -0.0011714288 -0.0094387400 -0.0015136066 -0.0048709736 -0.0101618035 -0.0000716547 0.0000131535 -0.0115577244 -0.0017356745 -0.0056499682 0.0029923140 0.0036730013 -0.0063029900 -0.0058372454 0.0137318093 -0.0142309315 -0.0039583787 0.0060267019 -0.0074218819 0.0038553968 0.0149092914 -0.0148206880 -0.0045649429 -0.0091762333 -0.0128247692 0.0063076162 -0.0007593081 0.0016852736 -0.0190918919 -0.0006087564 -0.0005633887 -0.0140557372 -0.0150914525 0.0263067400 -0.0136425941 0.0153284236 -0.0153933838 -0.0222210611 0.0006671789 -0.0140830012 0.0221384204 -0.0485585149 0.0439878652 -0.0820812417 -0.0275447302 0.0231321379 -0.0351323933 0.0051037043 -0.0190651417 0.0413918783 -0.0237364883 0.0206908867 -0.0135851334 0.0038499553 -0.0052289630 0.0119909655 0.0177845133 -0.0253873109 0.0509309846 0.0003209130 -0.0057511399 0.0412858363 -0.0398950288 0.0361397356 -0.0375755899 0.0127289568 -0.0090235972 0.0090905218 0.0358696694 -0.0415131014 0.0759233212 -0.0094369223 -0.0084081184 0.0117162664 -0.0295693530 -0.0006467427 -0.0175562428 -0.0216178451 -0.0072650209 -0.0183929326 -0.0368747740 0.0006041809 -0.0279327151 0.0079622574 0.0084149164 0.0243054458 -0.0314212743 0.0138466765 -0.0123175380 -0.0316913910 -0.0020759799 -0.0394012971 -0.0101293826 0.0004154739 -0.0183550327 -0.0045663763 0.0160263104 0.0225773354 -0.0484160779 0.0235907268 -0.0195350801 -0.0385971143 -0.0065562583 -0.0565515440 -0.0045503332 -0.0039959918 -0.0258805819 0.0056037119 0.0226201627 0.0474356340 0.0303396992 0.0094087797 0.0536010614 0.0052457865 -0.0112056358 0.0846999344 0.0029296502 -0.0077727283 0.0359177922 0.0014736670 -0.0009278147 0.0105634740 0.0196141372 -0.0184682251 -0.0234863131 0.0274954811 -0.0015727279 -0.0540399232 0.0225806296 0.0048466120 -0.0279932163 0.0268337460 0.0180503197 0.0182525013 0.0133283272 0.0125295700 0.0412409342 0.0527250875 0.0222539915 0.0257914483 0.0608147207 0.0400687751 -0.0008908902 0.0005102003 -0.0267979059 -0.0867015877 -0.0303801842 -0.0886106643 0.0027948754 0.0004250330 -0.0071573476 0.0518668808 0.0201306678 0.0064908458 0.0278702259 0.0100878004 0.0323172671 0.0543957194 0.0405512350 0.0137218049 0.0172849748 0.0505256721 0.0366531028 0.0454822570 0.0741539507 0.0201955561 0.0214338907 0.0486497133 0.0335149897 0.0189413817 0.0639110799 0.0454679227 -0.0778877377 0.1241304416 0.0709831376 0.0266386823 -0.0094460267 -0.0334334216 0.0782115554 -0.0458014492 -0.1243393096 -0.0308041190 -0.0610897751 -0.1507951018 0.0329147709 -0.0020940749 0.0130759895 0.0056198140 -0.0025565235 0.0190598551 0.0030805925 -0.0022154466 0.0207023054 0.0006478642 -0.0087995573 0.0163521063 0.0027104444 -0.0092669307 0.0132877650 0.0053451350 -0.0074875248 0.0129456025 0.0060901752 -0.0033908681 0.0205470082 0.0004290779 0.0008003600 0.0220178740 -0.0031162574 -0.0150578142 0.0034806437 0.0001689148 -0.0098349221 0.0099754329 0.0087236714 -0.0107738303 0.0131572646 0.0093874375 -0.0019930408 0.0097289921 0.0096229997 -0.0034459078 0.0127607506 0.0080072123 0.0003139679 0.0126076381 0.0078204990 0.0016357214 0.0081822168 0.0087039905 0.0042801272 -0.0003763775 0.0110819885 -0.0013230569 0.0116734403 0.0089177847 -0.0048286012 0.0128614052 0.0063226540 0.0074539926 0.0066201971 0.0011285291 0.0003048988 0.0088904100 0.0087513101 0.0084744625 -0.0053781346 0.0143996565 -0.0261159054 -0.0003443546 -0.0007221532 -0.0090586080 -0.0058295448 -0.0017843718 0.0199161334 0.0070698524 0.0014928356 0.0015933553 -0.0008042885 -0.0058732724 -0.0007701128 -0.0067226734 -0.0139947631 -0.0015828495 -0.0058794338 -0.0113378680 0.0018362751 -0.0075408479 -0.0076278243 0.0036886911 -0.0026641130 0.0099389300 0.0038490146 -0.0090333572 -0.0112036897 0.0059571544 0.0001145558 0.0202935457 -0.0010215131 -0.0042608654 -0.0019408826 0.0026454298 -0.0011669214 0.0132787625 -0.0023582453 -0.0042682589 -0.0024584318 0.0039497541 0.0020804530 0.0263253015 0.0129659695 -0.0133086871 -0.0088219574 0.0122359408 -0.0128757840 -0.0063818147 0.0151093861 -0.0178404755 -0.0049816714 -0.0047915581 -0.0118304359 0.0073827442 0.0273847356 -0.0211208481 -0.0074256916 -0.0092289015 -0.0101372570 0.0109871558 -0.0065790101 -0.0085117153 0.0043375409 -0.0198937841 -0.0042434371 0.0164555928 -0.0165548407 -0.0060095413 0.0052846572 -0.0398511241 0.0040971107 0.0288800348 -0.0460032096 0.0539800220 -0.0081027211 0.2097993139 -0.2428611522 0.2076883269 -0.0789146494 0.1197250878 -0.4775478945 -0.3530685345 0.3724846707 0.2799876525 0.0118738577 -0.0574537661 0.0045973947 -0.0060921031 -0.0430810982 0.0235278490 0.0333011308 -0.0743386750 0.0043676430 0.0102894736 -0.0686896997 0.0219824722 0.0102599429 0.0300249921 -0.0070548028 0.0223002415 0.0374660444 0.0294295413 0.0115813149 0.0273643637 0.0017585077 -0.0171297670 0.0007163730 -0.0234719995 -0.0104757120 0.0045794689 -0.0622600195 -0.0163381053 -0.0091491342 0.0197446166 -0.0118388000 0.0001978687 -0.0058139049 0.0257132745 -0.0325742398 -0.0044407206 0.0219275167 -0.0273656874 0.0039625745 0.0390926604 -0.0381564692 -0.0086433490 -0.0517252860 -0.0410350054 0.0367350553 -0.0298073807 0.0306993601 -0.1154307524 -0.0438336918 -0.0394565516 -0.0000726179 -0.0412805637 0.0754873564 0.0820979533 -0.0486410067 -0.1813406434 -0.0453668354 0.0626877391 -0.0315910229 0.0376779026 -0.0113307269 0.0275638061 -0.0741779106 0.0040956410 0.0097927513 -0.0361079516 0.0280051635 -0.0289500144 0.0422039423 0.0157638869 0.0013464855 0.0041186215 0.0138233608 -0.0052292045 -0.0235139459 0.0268874075 -0.0267058221 0.0184122115 0.0256181544 -0.0211144347 0.0451615021 0.0109876691 0.0140935978 0.0017004840 0.0082574305 -0.0014142626 -0.0484681456 0.0294964436 -0.0399169504 0.0168629445 0.0369414791 -0.0153917118 0.0322816052 0.0103253158 0.0205773109 -0.0030820226 -0.0023528311 0.0320507415 -0.0138808540 0.0100247033 0.0256041350 -0.0153130198 -0.0146296013 0.0019600824 0.0206970446 0.0041764489 0.0090906999 -0.0285871292 0.0005290580 0.0331055094 0.0049242918 -0.0111073268 0.0207729081 0.0283029395 -0.0102449345 -0.0041244222 -0.0136538316 0.0148319710 0.0011195532 -0.0430043014 -0.0004256448 0.0457164110 0.0041799583 -0.0167315083 0.0269853699 0.0491291490 -0.0142455733 -0.0197252492 -0.0239014794 -0.0214948219 -0.0078059571 0.0392864021 0.0228491295 -0.0266242357 0.0790269940 0.0275014417 -0.0441625880 0.0253929374 0.0207580791 -0.0145497625 -0.0047208222 -0.0082693730 -0.0049272534 -0.0132793547 -0.0162529463 -0.0074120781 -0.0112067559 -0.0065567427 -0.0118355442 -0.0159253924 -0.0161499723 0.0097025813 -0.0177736740 -0.0220526863 0.0176036493 0.0211470230 -0.0416830892 0.0593791902 0.0008145694 0.0866407456 -0.0015614536 -0.0055527043 -0.0124086101 0.0165481540 -0.0132471042 0.0398417406 0.0002370529 0.0199935354 -0.0506451150 -0.0485057099 0.0638745618 -0.0085106501 0.0272351346 -0.0338460657 -0.0116519588 0.0882058331 0.0789667724 -0.0507488362 0.0574787646 0.0489995367 -0.0453286093 0.0738050032 0.0036180335 -0.0421743650 0.0920250892 -0.0256412647 0.2606972344 0.1541928297 -0.0402700306 0.1824000138 -0.2047432635 0.0676621646 -0.0621494154 0.0282962364 -0.0252997255 0.0010225511 0.0152791196 0.0293053472 0.0669628269 -0.0050004081 0.0865543008 0.0915607189 -0.0214533429 -0.0271734740 0.0133590447 0.0400828679 0.0222772329 0.0182349881 0.0397483858 0.0186665108 0.0200964506 0.0390815929 0.0123070585 0.0053913946 0.0255304235 0.0206347388 -0.0070711134 0.0150719896 0.0391808437 0.0000798765 0.0247460277 0.0371815418 0.0230164722 0.0440192311 0.0121524886 0.0265159802 0.0443346626 0.0035179607 -0.0060299301 -0.0003571227 -0.0027257878 -0.0194983170 -0.0017534638 0.0517338895 -0.0074933929 0.0178052185 0.0475620966 0.0147923252 0.0102155693 -0.0067215557 0.0027714832 0.0355867377 -0.0106587204 -0.0002471958 0.0428910053 -0.0114862583 -0.0042890637 0.0388880095 -0.0170146307 0.0109702011 0.0085973626 -0.0117673012 0.0239414584 0.0054411425 -0.0057970819 0.0013778467 0.0392556481 -0.0117215974 0.0128702148 0.0099452242 0.0071726125 -0.0149043263 0.0484330361 -0.0190223949 0.0144289627 0.0023234815 -0.0094444107 -0.0399217575 -0.0020206867 -0.0119791360 0.0186933940 -0.0234576787 -0.0158829679 0.0237249880 -0.0093116346 0.0186583648 0.0183930900 -0.0106277509 0.0171175612 0.0004786883 0.0069195557 -0.0195212448 -0.0092593487 0.0119501024 -0.0040113943 -0.0022355064 -0.0064552622 -0.0443427868 0.0001457244 0.0011977942 -0.0193219223 -0.0062433570 -0.0193570050 -0.0766243603 -0.0006547514 -0.0090108986 -0.0346635907 -0.0025799327 0.0259812183 0.0301728158 0.0007548328 0.0227573072 0.0340505795 0.0042178147 0.0334344740 0.0494605560 0.0027964752 0.0292099066 0.0685370833 0.0113327146 -0.0176527390 -0.0123230324 0.0052318721 -0.0146681751 -0.0029048892 0.0389553673 -0.0403398048 -0.0158536483 0.0163204484 -0.0379211855 -0.0020236487 0.0748930042 -0.0504275279 -0.0231033056 0.0337267161 -0.0473857571 -0.0113061270 -0.0365585617 -0.0042577628 0.0209243821 -0.0368222374 -0.0110675490 0.0300000672 -0.0718639626 0.0081740743 0.0310634998 -0.0724387071 0.0019202398 0.0516973831 0.0107186353 -0.0347361654 -0.0875684911 -0.1749413635 0.2203172706 -0.2746773085 0.0447607029 -0.0632281378 0.2538760323 0.1980675723 -0.3120912399 -0.3237255318 0.0010620436 0.0067737665 0.0022325965 -0.0084810203 0.0233351315 0.0149741944 0.0021692629 0.0044352678 0.0012459319 0.0137571171 -0.0043931803 0.0146234069 0.0131212932 0.0502028552 -0.0334152164 0.0632276277 0.0005803138 -0.0742742792 0.0334571719 -0.0014787232 -0.0824577028 0.0179993572 -0.0094449943 -0.0791632189 0.0217515370 0.0253795143 -0.0557046624 0.0225134394 -0.0061039402 -0.0245617975 0.0515154937 -0.0187016794 -0.0555536709 0.0365480506 -0.0318387973 -0.0435696654 -0.0228985501 0.0241436950 0.0152270984 0.0181044824 -0.0238822999 -0.0387423273 0.0372761922 -0.0003198649 -0.0331293179 0.0258168896 0.0252203161 -0.0523465940 0.0317847033 -0.0149275139 -0.0042097858 0.0979032700 -0.0455887022 0.0585599760 -0.0304280634 -0.0255198236 0.0045081218 -0.0042033485 0.0134893952 -0.0238776037 0.0364458990 -0.0286439212 0.0646964677 0.0186326313 -0.0127787475 0.0271903769 -0.0091440803 0.0164507605 -0.0340211681 0.0131225336 -0.0094063743 0.0073316958 -0.0033338985 0.0058540106 -0.0059449754 -0.0169997647 0.0202076804 -0.0366603691 -0.0061099835 0.0085488252 -0.0328559023 0.0249111075 -0.0202166874 0.0252938757 -0.0041889565 0.0060186773 0.0014119018 -0.0278164314 0.0307012573 -0.0507412074 0.0039598806 0.0091444397 -0.0135312816 0.0244256804 -0.0008358209 0.0129839908 0.0202354346 0.0026224647 0.0147412408 0.0313478087 -0.0019066329 0.0234179404 0.0018532948 -0.0029736241 -0.0214970878 0.0312671429 -0.0084553557 0.0213895308 0.0253311543 0.0003675059 0.0192212662 0.0089513709 0.0007073563 -0.0036593857 0.0152359093 -0.0086609490 -0.0029439897 0.0404155167 -0.0129276835 0.0297680600 0.0279729156 0.0015049711 0.0259735886 -0.0025229730 0.0059148589 -0.0104934965 0.0120359134 -0.0126735655 -0.0108303186 -0.0128206471 -0.0015125596 -0.0469076386 -0.0087454911 0.0118956499 -0.0565653130 -0.0058793684 0.0023290301 -0.0226800750 -0.0508568721 0.0356933058 0.1058891460 -0.0075195537 0.0141156022 0.0161905977 -0.0082143068 0.0075498162 0.0282850882 -0.0164536147 0.0170461455 0.0088733060 -0.0059382763 -0.0142644233 -0.0176324505 0.0164076154 0.0017123845 -0.0308078766 0.0034567944 -0.0254939029 -0.0236576623 -0.0530961422 -0.0483203461 0.0130357242 0.0025312290 -0.0058405580 0.0505473979 -0.0322128783 0.0316752199 -0.0119724829 -0.0057631447 -0.0218555323 -0.0182240881 0.0238145001 0.0329830035 -0.0926441916 0.0685656019 0.0255408009 0.0113931918 0.0225077140 -0.0136057658 -0.0354099279 0.0097074471 -0.0485726608 -0.0302563078 -0.0120613627 -0.0282825427 -0.0174876243 -0.1517297046 -0.1258445703 0.0749696811 -0.1058379633 0.0600501626 -0.0042595276 0.0321085762 -0.1149101794 0.0025986900 -0.0330299223 -0.0002378521 -0.0525419209 -0.0413216271 0.0356107959 -0.0346261586 -0.0480305587 0.0852621324 0.0013525143 -0.0067987605 0.0878786124 0.0076226935 -0.0290645917 0.1024561100 0.0165244127 -0.0383554537 0.0939157496 0.0148743093 -0.0752820130 0.0817283656 0.0153928739 -0.0631810381 0.0834993750 0.0069572211 -0.0442054214 0.0974867178 -0.0015008855 -0.0406211322 0.1062420789 0.0062240542 -0.0238778718 0.0787943720 0.0061445289 -0.1089353073 0.0300178392 0.0030690728 -0.0561791387 0.0789074029 0.0160077676 -0.0576901969 0.1257405838 0.0012302167 -0.0260970083 -0.0093320716 0.1275020297 -0.0093184718 -0.0480880808 0.1263822309 0.0151982003 -0.0316470310 0.1154799798 0.0129267371 -0.0125160809 0.1244798982 -0.0194768469 0.0214639283 0.1188744566 -0.0249843373 -0.0135897034 0.1294376677 -0.0115719404 -0.0720737731 0.1190946311 0.0417684720 0.0173230759 -0.0084647674 0.0197797991 -0.0136147203 0.1258592539 -0.0199829614 0.0461704740 0.1267243003 -0.1583665772 0.0148461044 -0.0013698618 -0.0827147370 -0.0066988157 -0.0064457253 0.1276513276 0.0925176419 -0.0490451333 -0.0238880413 0.0038511029 -0.1008014750 0.0296522738 -0.0297652877 -0.0972412915 0.0153873222 -0.0331325056 -0.1036161145 0.0648395144 -0.0351822487 -0.0097888663 0.0657069821 -0.0256396181 0.0899659583 0.1027551010 -0.0281969544 0.0101891860 0.0908243726 -0.0040797930 0.1923753402 0.0027313582 -0.0526511135 -0.0725452296 0.0360392642 -0.0426283212 0.0420441160 -0.0315830816 -0.0624232734 -0.1027660046 0.0336116674 -0.0407846513 0.0982484580 0.0763898043 -0.0544150497 -0.0609581183 0.0769049367 -0.0688494752 -0.0786647783 0.0372637402 -0.0691944352 0.0124497026 -0.0973370634 -0.0599420432 0.0894023934 0.0800000392 -0.0641388527 0.0341363344 -0.1744517853 -0.0385246552 0.1645723323 0.0000807112 -0.0980895581 -0.0483997781 -0.1134637418 -0.0684187625 0.0663499874 -0.0199184469 -0.1181452526 -0.0944970933 -0.2111718916 -0.0513007455 0.1217826849 0.0013580211 0.0064676910 0.0304603789 -0.0155709260 0.0155278644 0.0242802457 0.0023369459 0.0007380893 0.0582529736 0.0256422493 -0.0016705306 0.0200503921 -0.0086376461 0.0184067328 0.0044586703 -0.0021054806 0.0058081318 -0.0053671486 -0.0132719914 0.0234457919 0.0058248929 -0.0140407958 0.0269968430 -0.0071880582 0.0020737900 0.0108973888 0.0016996655 0.0037490706 0.0171863224 0.0209080778 0.0011335595 0.0135844068 0.0110513782 -0.0109780266 0.0023643339 0.0008835075 -0.0072672109 0.0022629967 -0.0182562490 -0.0127178082 -0.0048577217 0.0173319180 -0.0130516272 0.0020009117 0.0061194170 0.0141665298 -0.0163923725 0.0036172777 0.0161282701 -0.0210678722 0.0018399242 0.0267601830 -0.0213237027 0.0005537298 -0.0360489361 -0.0205929982 0.0297943607 -0.0142644703 0.0124700828 -0.0377174183 -0.0266859946 -0.0120192094 0.0074676868 -0.0369086082 0.0484500218 0.0357994368 -0.0134733762 -0.0721459816 -0.0140165497 0.0104942895 0.0170876726 0.0042452677 0.0131653829 -0.0095244725 0.0368487293 0.0079758531 0.0018587024 0.0167746775 0.0060199163 0.0222667518 -0.0162476676 0.0262903431 -0.0071036841 0.0267596509 -0.0200534019 0.0265968507 -0.0259692037 -0.0192571280 0.0364181234 -0.0381051356 0.0160008083 0.0095540205 -0.0042583638 0.0441617463 -0.0250697103 0.0533615881 -0.0384425275 0.0355260214 -0.0431400518 -0.0359992381 0.0536932896 -0.0592351701 0.0151523971 0.0138590559 -0.0012300209 0.0176018109 -0.0006835970 0.0046111656 0.0225958658 -0.0048379446 0.0010731374 0.0108685385 -0.0024694077 -0.0010778681 0.0052264353 -0.0073219058 0.0000441363 0.0131421227 -0.0075123365 0.0023974765 0.0064292617 -0.0002397783 -0.0046988801 0.0027274947 -0.0021232746 -0.0054351844 0.0105859680 -0.0099520051 0.0044113920 0.0176055125 -0.0097462462 0.0051108495 0.0054666741 0.0036581431 -0.0065679147 -0.0013513470 -0.0002068025 -0.0082173051 0.0126264964 -0.0136535291 0.0092127991 0.0024827638 -0.0090095576 0.0010328952 0.0174773194 0.0090864968 -0.0196865255 0.0192863834 -0.0052694035 -0.0193135761 0.0174635058 -0.0155739684 -0.0164089627 0.0066778464 0.0269426698 0.0173614692 -0.0182886688 0.0453897092 -0.0097221302 -0.0279876719 0.0537325673 -0.0214501561 0.0134626617 -0.0557366568 -0.0298501738 0.0742608294 0.0039224198 0.0152902891 0.0491541698 -0.1001153648 -0.0437793821 -0.1043792749 -0.0988542309 0.0071881916 -0.0302666365 0.0388094194 -0.0285758528 -0.0397741532 -0.0004922988 0.0374886043 -0.0088283178 -0.1233368994 0.0897560685 0.1002907103 0.1118341312 -0.2017033112 0.2332429400 0.1253169681 0.1798682580 0.0698665594 -0.0886964986 -0.0768118672 0.0565322453 -0.1301918824 -0.0472578692 0.0402154501 -0.1234524663 -0.0210008675 -0.3426467032 -0.2940846201 0.1265140734 -0.2311874507 0.1667135107 -0.0665271048 0.1115228437 -0.2130771705 0.0049755729 -0.1169703973 0.0398383571 0.0700661618 -0.0170431138 -0.0669940509 0.0993188222 0.0080694574 -0.0092546768 -0.0064269140 0.0077054022 0.0151534895 0.0049225739 0.0111467086 0.0108347190 0.0043676175 0.0123826981 0.0105328347 0.0015346491 0.0100399771 0.0073568599 0.0037807068 0.0061514101 0.0099004473 0.0065017030 0.0084133887 0.0149488368 0.0052029611 0.0136173024 0.0095523012 0.0054837959 0.0128440071 0.0105771220 0.0012766912 0.0073132799 -0.0025929236 -0.0002863241 0.0017940329 0.0076606858 0.0071673565 0.0084966333 0.0153237301 0.0049477685 0.0095423861 0.0019727398 -0.0221272374 -0.0013974743 0.0246836959 -0.0260503044 -0.0069671173 0.0263726403 -0.0250370251 -0.0076884538 0.0228442490 -0.0278247429 0.0051492649 0.0017981459 -0.0231749163 0.0148984092 -0.0045785306 -0.0202173541 -0.0022464396 0.0307841069 -0.0257058854 -0.0023582937 -0.0039434292 0.0034169775 -0.0122406697 0.0279455999 -0.0292868646 0.0065031706 -0.0043294725 -0.0235006509 -0.0015484084 -0.0062666164 -0.0009597254 0.0145278289 -0.0087401053 -0.0045086384 -0.0060974827 -0.0287647359 0.0175523942 0.0101960277 -0.0160713744 0.0225101765 -0.0041269489 0.0067737111 0.0037800157 -0.0069993901 0.0094160102 0.0116187393 -0.0097788106 0.0010105890 -0.0188133014 -0.0087736611 0.0034828290 -0.0192395573 -0.0163255643 -0.0059113287 -0.0364281056 -0.0122048996 -0.0039006390 -0.0388346699 -0.0024965694 0.0181887587 0.0231495945 -0.0049479207 0.0156284083 0.0114172549 0.0049491479 0.0227099357 0.0353784962 -0.0037096132 0.0184114317 0.0207092512 -0.0015378886 -0.0029782823 0.0016116891 -0.0030905367 0.0002496002 0.0092383754 0.0177039726 -0.0109185195 -0.0122647581 0.0226616289 -0.0068785753 -0.0139725504 0.0299395087 -0.0179130446 -0.0212504624 0.0407646986 -0.0129481885 -0.0298772989 -0.0155063466 0.0141175223 0.0193953024 -0.0036034891 0.0098791227 0.0086326890 -0.0300419235 0.0242868894 0.0332500120 -0.0114352931 0.0175331367 0.0144841739 0.0460185314 -0.0040191290 0.0954877038 0.1576380311 -0.1574189722 0.2078746796 0.0070175725 -0.0343965621 -0.0715726366 0.0023810771 0.1677265155 0.2286629769 0.0180849151 0.0538965049 0.0236103360 0.0196589916 0.0569343786 0.0242666733 0.0071067087 0.0621514187 0.0242177446 0.0358210827 0.0560511264 0.0159275112 -0.0215409500 -0.0338290429 0.0121122783 -0.0618137362 -0.0164541468 -0.0025487965 -0.0392163176 -0.0216174040 -0.0135562088 -0.0319391053 -0.0102009515 -0.0315010095 -0.0428091664 -0.0277035162 -0.0004966707 -0.0367823663 0.0343590479 -0.0522836740 -0.0319925687 0.0092826917 -0.0333285106 -0.0881193363 0.0478144511 -0.0206876567 -0.0572692252 0.0743295531 -0.0211119791 -0.1193267122 0.0484931386 -0.0335977209 -0.0282160527 0.0374089743 -0.0619529256 -0.0430902134 -0.0297334862 0.0258142034 -0.0585708321 -0.0059281799 -0.0069379894 -0.0317822089 -0.0966796129 -0.0361620724 -0.0893680574 0.0731955085 0.0228314166 0.0672210920 -0.0227755111 0.0227596470 0.0054027313 -0.0008487185 0.0132346138 0.0002876671 0.0011926513 0.0059261625 0.0037294633 -0.0122704405 0.0133940851 0.0250783790 -0.0112251445 0.0434761407 -0.0340348131 0.0169857783 -0.0514344387 -0.0314381740 0.0089970814 -0.0357785961 0.0065115205 -0.0109983580 0.0246786212 0.0417168837 -0.0201237168 0.0717188112 -0.0527630893 0.0276893128 -0.0923195224 -0.0523557073 0.0181315693 -0.0681994714 0.0447953418 -0.0075682913 0.0276541086 0.0431602388 0.0114698970 0.0178672285 0.0317894667 0.0219467440 0.0126121902 0.0504382053 0.0083969028 0.0174779846 -0.0310849304 -0.0251503463 -0.0239898153 0.0503025744 -0.0273154042 0.0110031937 0.0278135178 0.0220754518 0.0257892969 -0.0197624091 0.0085871145 0.0003482981 0.0075699729 -0.0451048881 -0.0065261220 0.0819499146 -0.0450410939 0.0141729974 0.0340787240 0.0423518936 0.0399314602 -0.0458371024 0.0235288321 -0.0043733035 0.0036632758 -0.0726393328 -0.0170177218 -0.0690792836 -0.0342063534 -0.0519238452 -0.0316547263 0.0012537064 0.0251972834 -0.0291841137 0.0347888004 0.0200409134 -0.0195735433 0.0701093532 0.0153412399 0.0063487696 -0.0067405144 0.0091943763 -0.0232070760 0.0328672505 -0.0501743779 -0.0175891068 0.0308518736 -0.0298284443 -0.0043272963 -0.0023148047 0.0014022479 0.0123542027 0.0093555093 -0.0034988863 0.0843296945 0.0056458759 0.0211284383 0.0202932891 0.0159263084 -0.0166187691 -0.0709498999 0.0847999610 -0.1470852863 0.0099662571 -0.0595127947 0.0961861587 -0.0662767367 -0.0597639931 0.0293338062 0.0441977880 0.0438331572 -0.1453515699 0.1087498688 0.0727189210 0.0885842049 0.1422158163 0.0449791962 0.0152956887 0.1058178657 -0.0545177782 0.0667997032 0.0683156081 0.0416655635 -0.0046448323 0.0061302132 0.0043692349 -0.0093406595 0.0187910489 0.0272875995 -0.0750159353 0.0667409446 0.0447038756 0.0062886389 0.0659267985 0.0678452492 0.2720968550 0.0125067532 -0.0781946162 0.1047006658 0.0092679209 -0.2778719535 0.1017538884 0.0109880601 -0.0290659114 0.0338096460 0.0283114166 -0.0541136188 0.0376972448 0.0389171487 -0.0543791122 0.0358814880 0.0669469201 -0.0329594376 0.0204087226 0.0564869829 -0.0116536459 0.0196598167 0.0471647300 -0.0209736795 0.0299997534 0.0372164748 -0.0654895620 0.0559125246 0.0260076384 -0.0558786471 0.0518712714 0.0784556042 -0.0316671756 -0.0108480535 0.0503527725 0.0053386478 0.0000380831 0.0618415070 -0.0276186605 0.0177880181 0.0254551254 0.0480928058 0.0518825899 0.0599506230 -0.0021470161 0.0691122613 0.0935651049 0.0002752106 0.0670950699 0.0716630430 0.0034606666 0.0483295876 0.0355879318 0.0520986621 0.0278145032 0.0349544878 0.0762650560 0.0405240808 0.0575430275 -0.0274078256 0.0581424285 0.1014739267 0.0492349530 0.0364642684 0.0617978093 -0.0170456171 0.0574241594 0.0380461633 0.0820228788 0.0406498841 0.0598473081 -0.0255980233 -0.0213735349 0.1014570073 -0.0383969143 -0.0294316090 0.1106730197 0.0814680489 0.0191562915 0.0902492512 0.0715400472 0.0169875620 -0.0403099787 -0.0099927225 -0.0331140690 -0.0407436911 -0.0115924705 -0.0440088717 -0.0440345112 0.0163677293 0.0008988768 -0.0387493816 0.0314707117 0.0298803980 -0.0501720160 0.0241780225 0.0201908094 -0.0321807806 0.0496990535 0.0731126748 -0.0408919304 -0.0066338933 -0.0404178390 -0.0388090816 0.0189167820 -0.0005398950 -0.0398251944 -0.0118236839 -0.0531190408 -0.0316514344 0.0311011104 0.0123359059 -0.0653054797 0.0099156154 -0.0189167436 -0.0691382220 0.0080508108 -0.0296565556 -0.0804439593 -0.0014508079 0.0115118172 -0.0656581084 -0.0516154750 -0.0065617329 -0.0896563701 0.0179976730 0.0456624520 -0.0689025291 -0.0640325513 0.0181546743 -0.0435400309 -0.0586442866 -0.0650194709 -0.0236688463 -0.0867685795 -0.0582808163 -0.0366104708 -0.0823039464 -0.1081114908 0.0163326923 -0.1255897355 -0.0883821049 0.0019352157 -0.0053564877 -0.0206432822 -0.0687419969 0.0892054419 -0.0901704039 0.0174447926 -0.0114425144 0.1033935648 0.0687928197 -0.1091553232 -0.1082769309 0.0074364279 -0.0399308831 0.0584957845 -0.0377349484 -0.0527133850 0.0853616272 0.0441128970 -0.0611822723 0.0724546303 0.0044843055 -0.0397603925 0.0573948343 0.0050862199 0.0081734499 -0.0044571797 0.0134835401 0.0030333654 -0.0053856338 0.0088280014 0.0041165993 -0.0030153976 0.0067036139 0.0030083353 0.0033928081 0.0079452158 0.0068076746 -0.0014681253 0.0138147020 -0.0063279868 0.0090613967 0.0118271633 -0.0008604434 0.0056334489 0.0192702993 -0.0078745839 0.0024433744 0.0108875679 -0.0118488287 0.0041370258 0.0233173557 -0.0064995793 0.0066469758 0.0165074586 -0.0043480330 0.0092213914 0.0065767490 0.0085342645 -0.0081208628 0.0161426413 -0.0054181632 0.0055203327 0.0247398907 0.0035996238 0.0238385803 0.0117102675 -0.0286151004 0.0001641027 -0.0354559414 0.0449092696 0.0007123981 -0.0070636683 -0.0126536685 0.0796219607 -0.0134498193 0.0085711965 0.0447184896 -0.0048636336 0.0476054174 -0.0213059906 0.0006412806 0.0041006689 0.0228344377 -0.0373959291 0.0397549236 0.0114531690 -0.0326307426 0.0625395937 -0.0196147958 -0.0017701431 0.0337995695 -0.0209975418 0.0151651326 -0.0239592586 0.0382021715 -0.0530004641 0.0463651325 0.0153963686 -0.0459177029 0.0903865890 -0.0313414183 -0.0035266300 0.0247028979 -0.0019974917 0.0066036845 -0.0275542591 0.0122354514 0.0239124288 -0.0405347574 0.0032590473 -0.0015368599 -0.0407980781 0.0162288736 0.0197566797 -0.0172098340 -0.0482978654 -0.0037010047 -0.0233773709 0.0036825787 0.0193007531 -0.0546884310 0.0144414420 0.0316703429 -0.0408592973 -0.0192383725 0.0060025897 -0.0066685973 -0.0290628736 -0.0133021925 -0.0165214421 0.0140057613 0.0253379736 -0.0727002272 0.0292178396 0.0424357180 -0.0485373140 -0.0279283303 -0.0020908371 0.0163467620 -0.0478967106 0.0206546393 -0.0045900946 -0.0835023534 0.0070910106 0.0349897650 -0.0543539220 0.0066611820 0.0154013879 -0.0281209587 -0.0004613467 -0.0086683384 -0.0007866647 0.0090943511 -0.0303266500 0.0127175502 -0.0142135839 0.0100518223 -0.0421988452 0.0150351222 -0.0432939008 0.0339961314 -0.0134485651 0.0162148640 -0.0025923987 -0.0402193213 -0.0068982278 -0.0121503350 -0.1123941733 0.0402976338 -0.0091275383 0.0087292757 0.0083395543 0.0058264849 -0.0662788034 0.1165150235 -0.1724146103 0.1256968688 -0.0388465105 0.1060578296 0.0978154796 0.1162487977 -0.0712029505 -0.0966341746 -0.0683198976 0.2391490289 -0.2051867341 -0.1289860376 -0.1799231251 -0.1542705444 0.0145397108 0.0305779840 -0.1295813020 0.0855188382 -0.0547814200 -0.1197829013 0.0364572468 -0.0041608265 0.0726124297 0.0643991349 -0.0111069098 0.0412079561 -0.0630839939 0.0486563350 -0.0561609660 0.0121200942 -0.0069103713 0.3428228635 0.0846695367 0.3165558827 0.1048906771 0.0663863618 0.0449679066 0.0721417004 -0.3832805793 0.1622632887 -0.0018238472 0.0080542054 -0.0056786833 -0.0058878458 0.0135333832 -0.0061031404 -0.0080786344 0.0135493730 -0.0053870563 -0.0140269277 0.0086308678 -0.0018569491 -0.0121409152 0.0034960311 -0.0009507140 -0.0099112551 0.0053172174 -0.0034764235 -0.0077179863 0.0164368689 -0.0106518583 -0.0056217442 0.0134559745 -0.0082668629 -0.0170764065 0.0069226815 0.0026687819 -0.0111236986 -0.0006708636 0.0037246533 -0.0129822325 0.0061545459 -0.0006864249 -0.0100012569 -0.0053493900 -0.0085759538 -0.0143534734 -0.0011355193 -0.0112164075 -0.0208734323 -0.0033749640 -0.0105282783 -0.0158285899 -0.0026559279 -0.0055753992 -0.0106001975 -0.0086943963 -0.0020488482 -0.0141758854 -0.0087998237 -0.0069248337 -0.0123039918 0.0009085610 -0.0080059428 -0.0219695858 -0.0133120354 -0.0082398217 -0.0113113411 -0.0007006300 -0.0069299861 -0.0110588542 -0.0153720526 -0.0048273496 -0.0155101394 0.0069573605 0.0035049985 -0.0198541083 0.0056576321 0.0061707992 -0.0193406964 -0.0238757942 -0.0023226579 -0.0233057808 -0.0143296205 -0.0096731874 0.0091032110 0.0013839349 0.0004704569 0.0077378517 0.0018030949 0.0025960988 0.0120973204 -0.0038083753 -0.0000922352 0.0108045800 -0.0066378790 -0.0000633836 0.0158156489 -0.0045764469 -0.0018025284 0.0113353025 -0.0089571118 -0.0015235467 0.0065349114 -0.0012221413 0.0021012879 0.0081949951 -0.0059808032 0.0009983633 0.0038653140 -0.0011726279 0.0017217154 0.0062210493 -0.0090286159 0.0005013370 0.0191152151 -0.0014830309 0.0025769138 0.0192999339 -0.0024518186 0.0024702749 0.0193997399 0.0007438956 0.0005695942 0.0101108201 0.0109735753 0.0077687776 0.0224448034 -0.0026541393 -0.0051243316 0.0062877533 0.0145739302 0.0074084283 0.0123060921 0.0089326598 0.0101081744 0.0024928794 0.0161928481 0.0149279596 0.0116448077 0.0119516402 0.0157609439 -0.0092915496 0.0236117024 0.0228838099 0.0324485814 -0.0489579689 0.0744550165 0.0618520458 -0.1185604541 0.1263969994 0.0143870337 -0.0725297072 0.0288317891 0.0509876343 0.0280556966 0.1274698504 0.0158826821 -0.0451663763 0.0489859527 -0.0065443282 -0.0479926677 0.0639408829 0.0348067606 -0.0547739289 0.0568012590 0.0168399562 -0.0442020897 0.0461700923 0.0013786373 0.0002603857 0.0029692743 0.0105293717 -0.0053654599 0.0024714762 0.0067457962 -0.0029865258 0.0084309790 0.0134754123 -0.0003148897 0.0101486755 0.0127408302 0.0004393979 0.0100407024 0.0138403902 -0.0070981126 0.0006540802 0.0120753289 -0.0049275079 0.0039718597 0.0100395033 -0.0016368695 0.0053591440 0.0083806283 -0.0079442584 0.0019942822 0.0093753709 0.0010052115 0.0098188453 0.0200584727 -0.0051482816 -0.0021751321 0.0196512807 -0.0104037166 0.0119114122 0.0211718995 0.0035569027 -0.0115755273 0.0100537273 0.0036533115 -0.0255513545 0.0375248006 0.0245163817 -0.0080104596 -0.0227905349 0.0077324995 0.0163327765 0.0047717483 -0.0092653979 0.0342154686 -0.0019003157 -0.0021441249 0.0185548013 -0.0091406814 0.0149097145 -0.0104991401 -0.0110958706 0.0031448083 -0.0033704305 -0.0027381162 0.0027523242 0.0185085573 -0.0062081583 0.0126694662 -0.0001407014 -0.0116926081 0.0132998732 -0.0176486645 -0.0114513752 -0.0007684660 -0.0061581714 0.0001706472 0.0006505372 0.0327889852 -0.0053396070 0.0166355921 0.0026124931 -0.0169242115 0.0024419128 -0.0001339971 -0.0177704510 -0.0162022276 0.0030343475 -0.0173291155 -0.0157085580 -0.0072955893 -0.0162680555 -0.0178914986 0.0058212301 0.0116515026 -0.0010928668 -0.0138765231 -0.0100100688 -0.0050346933 0.0200171559 -0.0024023164 -0.0274261019 -0.0030706264 0.0098257066 -0.0177582660 -0.0171499085 0.0038487171 0.0055291408 0.0106045482 -0.0121895255 -0.0021150304 0.0400292479 0.0008808788 -0.0398893322 0.0017414212 0.0167010274 -0.0234513544 -0.0274860641 0.0080911932 0.0200401505 0.0214344208 0.0202466224 0.0071948160 -0.0255127020 -0.0038997319 0.0139833340 -0.0378715798 -0.0068054076 0.0091450651 -0.0247599056 0.0009341006 -0.0075232292 -0.0015921961 -0.0249938094 -0.0107893000 -0.0058896580 -0.0202826113 0.0092952995 -0.0272565694 -0.0260010558 0.0270539024 -0.0464865862 -0.0078103037 0.0114644450 0.0296183659 0.0135162334 0.0363404727 0.0451177945 0.0911128012 -0.0092240929 0.0383019128 0.0843222677 0.0333168665 0.0107496117 -0.0336719636 0.0075743310 -0.0475303745 -0.0537781252 -0.0398623617 0.0239051975 -0.2104825548 -0.1674436913 0.1430971409 0.1110055360 0.1010555767 -0.3378768384 0.2412275091 0.2414934307 0.3043241831 0.1284168142 0.0131788364 -0.0064115964 0.1077208179 -0.0489625840 0.0877207175 0.1077080562 -0.0093752391 0.0336258462 0.0896697437 0.0511884363 0.0619173167 0.1064253086 0.0069214801 -0.1134718593 0.1808924091 0.0747370657 0.0502720885 -0.0687090083 0.0053277362 0.0779198855 -0.0546760172 -0.0833553152 0.0263050189 -0.0554342410 -0.0787466493 0.0267724703 -0.0073227143 0.0005128848 -0.0086042038 -0.0100674975 0.0141598155 -0.0145560111 -0.0116936311 0.0186852489 -0.0179655744 -0.0195673646 0.0129969529 -0.0139487323 -0.0158483552 0.0055320695 -0.0137180173 -0.0161855224 0.0020042566 -0.0113068760 -0.0129411740 0.0174626176 -0.0193207311 -0.0069539447 0.0211739729 -0.0248309239 -0.0235162801 0.0093837994 0.0025287799 -0.0125801466 0.0028821042 -0.0097791427 -0.0214379842 0.0026581114 -0.0062140393 -0.0064433371 -0.0058966203 -0.0076045666 -0.0110128368 -0.0002051957 -0.0099760238 -0.0159993038 -0.0026957722 -0.0092069429 -0.0108087887 -0.0047602006 -0.0046130452 -0.0066010476 -0.0093138300 -0.0020542893 -0.0087093453 -0.0106608343 -0.0055327007 -0.0099643082 0.0024104241 -0.0078272423 -0.0181907740 -0.0077345887 -0.0066941179 -0.0068194079 -0.0044211229 -0.0053228160 -0.0066560456 -0.0153630857 -0.0040934193 -0.0138957383 0.0044701111 0.0091660544 -0.0349338197 0.0095357339 0.0132571593 -0.0193287956 -0.0128444776 -0.0040268078 -0.0182294318 -0.0083200444 -0.0064507599 0.0104181078 -0.0018526361 0.0137008516 0.0145605921 -0.0015698097 0.0145399042 0.0113819319 -0.0082939392 0.0048269130 0.0099257548 -0.0132690218 -0.0064526974 0.0134834065 -0.0096707824 0.0014406260 0.0073762250 -0.0171773268 -0.0192165728 0.0139925193 -0.0044620028 0.0120463575 0.0123588418 -0.0112676098 -0.0008027503 0.0129661739 -0.0031974272 0.0151203105 0.0109798084 -0.0140592300 -0.0075847352 0.0119707481 -0.0009986684 0.0042578798 0.0116719199 0.0005564893 0.0065851690 0.0097420891 0.0050363626 0.0000078132 0.0102979043 0.0142762009 0.0013675584 0.0061959714 0.0029945883 -0.0049467941 0.0081333801 0.0182296777 -0.0019639236 0.0128986416 0.0113254009 0.0097988097 0.0106183432 0.0168100308 0.0063421619 0.0159002333 0.0143085504 0.0167880625 0.0090421675 0.0219193281 0.0083833250 -0.0048208384 -0.0298494433 0.0261482346 -0.1948394218 0.1396619573 -0.0947546608 0.0275898955 -0.0528001251 0.3298390641 0.1967982218 -0.2148759318 -0.1452923798 -0.0404502478 -0.0529063340 0.0015957518 -0.0780149518 -0.0900092458 0.0143099277 0.0002645568 -0.0722121000 0.0220936820 -0.0700887573 -0.0422237486 -0.0068851595 -0.0065198658 -0.0040515197 -0.0033237083 -0.0160980290 -0.0075623489 -0.0248110755 -0.0122656127 -0.0076588119 -0.0247291221 -0.0089688554 -0.0034752463 -0.0123705644 -0.0095470246 -0.0015212802 -0.0007286427 -0.0005301190 0.0015088191 -0.0006124867 -0.0061329231 0.0035221379 0.0013286894 -0.0173210400 0.0064444958 0.0047617771 -0.0080232011 0.0073682862 0.0013272626 -0.0207303350 0.0067615689 0.0037399298 0.0072474226 -0.0000902867 -0.0037796181 -0.0079740424 -0.0010967427 0.0062443983 0.0049741599 -0.0039035109 -0.0018367447 0.0050389681 -0.0087958291 -0.0046466198 0.0224909897 -0.0020051167 -0.0044553252 -0.0032078156 0.0343228886 0.0377382387 -0.0472620570 -0.0011471912 0.0370427251 -0.0339209266 0.0133655775 0.0283285210 0.0147679400 0.0407590691 0.0057030242 -0.0093937919 0.0041771580 0.0116536732 -0.0388069857 0.0380223986 0.0282271007 -0.0146721910 0.0565737798 0.0168923613 0.0133517616 0.0264743888 0.0000810243 -0.0065907912 -0.0228722352 0.0048045111 -0.0559097955 0.0451355914 0.0376911270 -0.0171694936 0.0828143015 0.0225895855 0.0139106939 0.0220217843 0.0153050233 -0.0046986871 -0.0257115544 -0.0057430878 0.0146975073 -0.0381669475 -0.0375134863 -0.0315009791 -0.0350480836 -0.0299659846 0.0620908356 -0.0217319929 0.0315349996 -0.0295195783 -0.0128320837 -0.0283762927 -0.0101276165 -0.0515700013 -0.0497046800 0.0431514618 -0.0436177543 -0.0110600585 0.0176751125 0.0000145839 0.0026587491 -0.0528614308 0.0001985724 -0.0335814294 -0.0241874370 -0.0680871257 -0.0792066583 0.0663821448 -0.0567644839 -0.0069330549 0.0253111639 0.0276960178 0.0216766654 0.1047572143 -0.0173026020 0.0795933955 0.0282130428 0.0226409829 -0.0160382469 0.0282123402 0.0097372203 -0.0169971261 -0.0020598642 0.0084325400 -0.0013659786 -0.0044372581 -0.0111181029 -0.0159438859 -0.0087118848 -0.0091468185 -0.0131606205 -0.0089185818 -0.0111593364 -0.0156001810 -0.0197535240 0.0092709280 0.0225251560 -0.0071281828 0.0315379570 0.0635344468 -0.0913626695 -0.0396804350 -0.0109134380 0.0550840084 -0.0056447966 0.0386558405 0.0029859032 -0.0072437534 0.0008858339 0.0147047242 0.0353160936 -0.0639097624 -0.0131345865 -0.0182696297 0.0967436477 -0.0058576928 0.0544959761 0.0289375033 0.0074215818 0.0759788423 0.1038171443 -0.1812357120 -0.1050703263 -0.0504427191 -0.1222511777 0.0546498509 -0.0482720159 -0.0410877700 -0.1140475041 0.0377640003 0.1159412014 0.0623032658 0.0813664463 0.0984991260 -0.0912337183 0.0271514267 0.0518502842 -0.0155933597 0.0338766541 -0.4184882222 0.0145986480 -0.1974612592 0.1628580601 -0.1503436997 0.3137934966 0.3162535868 0.2679628313 -0.3471032119 0.0029467843 0.0035534421 0.0088338712 0.0061601582 0.0002328030 0.0099326489 0.0105485633 0.0033826433 0.0091457337 0.0162763311 0.0061532455 0.0072032997 0.0150493188 0.0125462671 0.0057672013 0.0137631532 0.0096204185 0.0057342011 0.0066862675 -0.0039706989 0.0148689595 0.0073779326 0.0036336365 0.0130340977 0.0153171445 -0.0047559693 -0.0031516169 0.0153842258 0.0175093149 0.0011150284 0.0189297361 0.0098618950 0.0004912971 0.0014793361 0.0069604346 0.0007567960 0.0067141287 0.0010152927 0.0014695595 0.0119436060 0.0001068505 0.0017182379 0.0099452701 0.0008969671 -0.0000566479 0.0054801066 0.0070478224 -0.0007097071 0.0010091105 0.0104284163 -0.0005374474 0.0058678449 -0.0021337762 -0.0007070707 0.0117207554 0.0033277002 0.0048210790 0.0102092573 -0.0015853976 0.0007418294 0.0064648282 0.0108056090 0.0016514218 -0.0000636631 -0.0075619098 -0.0061767067 0.0274504759 -0.0140165847 -0.0108929804 0.0080051167 0.0001040459 0.0067264867 0.0137241007 0.0095674219 0.0071103169 -0.0143765923 -0.0070314317 -0.0289544883 -0.0148826888 -0.0089211940 -0.0329522053 -0.0119629906 0.0095364602 0.0037891937 -0.0077938499 0.0199785648 0.0269344316 -0.0118826424 0.0168545717 0.0220014013 -0.0015166209 0.0355289075 0.0657450843 -0.0158457431 -0.0088771751 -0.0382341180 -0.0117819787 0.0070522159 -0.0064663507 -0.0188091187 -0.0141460901 -0.0514673602 -0.0088735214 0.0119837469 -0.0009401960 -0.0168544116 0.0062779327 0.0071761986 -0.0154004523 0.0026277219 0.0027793338 -0.0214345243 0.0043073440 0.0147650610 -0.0134027566 -0.0091706622 0.0083253777 -0.0262129482 0.0091959791 0.0215686091 -0.0140935453 -0.0121321661 0.0141795933 -0.0017939893 -0.0145961602 -0.0093973864 0.0039730994 -0.0212047704 -0.0085504701 0.0064516872 -0.0229456062 -0.0222123382 0.0199527795 -0.0337260130 -0.0198458712 0.0175339038 -0.0330398494 0.0101405840 0.0581060567 -0.0803701786 0.0446436944 0.0003374700 -0.0527485252 -0.0384799945 0.0147875488 0.0211158174 0.0499613785 0.0061745165 -0.0040143314 0.0021975016 -0.0067539003 0.0001450368 0.0131765099 0.0118697916 -0.0023098578 0.0116575617 0.0208058969 -0.0049883085 0.0005016867 -0.0049397251 -0.0029689264 -0.0349511058 -0.0209959946 -0.0215042113 -0.1017420895 -0.0181600212 -0.0217260734 -0.1023188913 -0.0073583848 -0.0103674261 -0.0353825323 -0.0025985597 0.0029671692 -0.0195269825 -0.0010590647 0.0024496785 0.0469904981 -0.0154513952 0.0192250582 0.0401110302 -0.0268813456 0.0056140703 0.0445515748 -0.0055381801 -0.0041197634 0.0300713888 -0.0134977761 -0.0016068119 0.0381501622 0.0128961548 -0.0135295083 0.0404817417 0.0005633141 0.0132485940 0.0029836636 0.0201312068 -0.0058465397 0.0109625551 0.0021171210 0.0283827257 0.0113693054 0.0556426968 -0.0468692170 -0.0079515793 -0.0245855967 0.0164473573 0.0088310393 -0.0172625327 -0.0016041507 -0.0063929369 -0.0085111563 0.0005850753 -0.0018596334 0.0065974348 0.0155031270 -0.0051953522 -0.0130765704 0.0033439408 -0.0230543313 0.0098980721 -0.0007300956 0.0318519643 0.0167360159 0.0088318884 0.0214305435 0.0072486543 0.0080862567 -0.0096500460 -0.0217644852 0.0008209233 -0.0411111704 0.0149027590 -0.0043865722 0.0577667093 0.0282301307 0.0103449290 0.0417988187 -0.0149010434 0.0085495377 -0.0078216281 -0.0272882714 -0.0077456956 -0.0178487897 -0.0177252799 -0.0153692642 -0.0253029293 -0.0343859882 -0.0105647836 -0.0176729846 0.0082687574 0.0062460429 -0.0031853063 -0.0356118361 0.0074905825 -0.0192418416 -0.0162325511 -0.0206658159 -0.0124071994 0.0067347945 -0.0129477697 -0.0058895039 -0.0131396338 0.0176997350 -0.0120865314 -0.0514985924 0.0158813322 -0.0231769510 -0.0135149928 -0.0322408447 -0.0081088486 0.0234429974 -0.0221929847 -0.0024341388 -0.0145197687 0.0345786080 -0.0144553851 0.0254635948 0.0122732934 0.0039948793 0.0376214943 -0.0031898765 -0.0071824022 0.0366213759 -0.0267800518 -0.0134563593 0.0125121844 -0.0094022064 -0.0173058702 -0.0194989997 0.0088417115 -0.0043373966 0.0018203162 -0.0048890634 0.0169984507 0.0045230094 -0.0069599153 0.0038362227 0.0095674969 -0.0087032731 -0.0016641704 0.0001793032 -0.0172613766 -0.0083250542 0.0311307132 0.0203220844 0.0157034961 -0.0111442868 0.0107371637 -0.0206526358 0.0163974044 -0.0211616214 0.0475885886 -0.0013470821 -0.0125562498 0.0297963306 -0.0517872597 -0.0447704445 0.0008141329 0.0250284420 -0.0242547640 -0.0756068697 0.0318887083 0.0171566816 0.0319895428 0.0240139601 0.0165580496 0.0240575372 0.0312224317 0.0356448274 0.0533913722 0.0624198951 0.0414100530 -0.0103610755 -0.0398074180 -0.0206998681 -0.0385011554 -0.0284708985 0.0489642214 -0.0436259166 0.0092793097 0.0323822005 -0.0068188696 0.3778867663 -0.0379401920 0.0913995726 -0.1328412540 0.1733992714 -0.3079252394 -0.2679537206 -0.1620936899 0.2789488831 0.0086300602 0.0191000373 0.0215540369 0.0040609103 0.0150870203 0.0341758784 0.0151774358 0.0244309468 0.0411650047 0.0250797816 0.0281974753 0.0377673476 0.0259650584 0.0304571019 0.0381152110 0.0267974683 0.0236592314 0.0263669329 -0.0031235982 0.0078184879 0.0390723343 0.0070111570 0.0277955155 0.0500570662 0.0126606796 -0.0070336146 -0.0061721160 0.0315548640 0.0334246460 0.0384276982 0.0382742682 0.0213476235 0.0161245655 0.0008710658 -0.0079928484 -0.0337837988 0.0028640599 0.0040418899 -0.0487653944 0.0051084124 0.0061978656 -0.0478057682 0.0126928120 0.0063987526 -0.0422887017 0.0165202892 -0.0005083081 -0.0250390512 -0.0099155397 -0.0141813678 -0.0310202841 -0.0025613153 0.0063074911 -0.0557557385 -0.0096242615 -0.0035373639 0.0006397044 0.0216292064 0.0119364968 -0.0459956999 0.0218520211 0.0001984660 -0.0191153233 -0.0495319536 -0.0112412648 -0.0227768100 0.0599923648 -0.0432673391 -0.0357744195 -0.0554460968 -0.0310943266 0.0151508825 0.0210553459 0.0097774756 0.0430106329 -0.0237496920 -0.0230683103 -0.1035244595 -0.0232768839 -0.0327506693 -0.1168278962 -0.0116761327 0.0412731867 0.0243779228 0.0049108117 0.0773345336 0.0910623955 -0.0110719805 0.0735481291 0.1043881823 0.0263084737 0.1383765376 0.2335926482 -0.0240574621 -0.0329740898 -0.1536312431 -0.0107780694 0.0225804773 -0.0516013031 -0.0341818121 -0.0536184628 -0.2039151815 -0.0028129696 0.0345887012 -0.0503319998 -0.0452759597 0.0311013744 0.0626125780 -0.0342290561 0.0138103702 0.0475724358 -0.0546212783 0.0254747366 0.0836927387 -0.0160098868 -0.0149779862 0.0586283902 -0.0742772898 0.0402739658 0.1006986386 -0.0146241716 -0.0233382962 0.0706121957 0.0238946190 -0.0346135091 0.0062519064 0.0476020503 -0.0550320050 0.0040707365 0.0614433806 -0.0626670449 -0.0327373560 0.1084589918 -0.0979943403 -0.0377854753 0.0033228109 -0.0092483149 0.0479346628 -0.0511358261 0.0082593268 0.0374403373 0.0068416889 -0.0245204180 0.1282311751 0.0783174442 -0.0276833126 0.0208785238 -0.0275855279 0.0260674298 -0.0471635652 -0.0019686014 0.0175492335 -0.0683129867 -0.0476667967 0.0415545016 -0.0491557690 -0.0347267442 0.0329659282 -0.0540011180 -0.0014471184 -0.0024749116 0.0192333565 0.0042777335 0.0075663867 0.0514574920 0.0028532766 0.0048793378 0.0444446049 0.0021930006 -0.0069832036 -0.0026601376 0.0016411724 -0.0077616680 0.0032319833 -0.0044624002 -0.0112546017 -0.0325605520 -0.0059434841 -0.0151907069 -0.0289708628 -0.0274825047 0.0036399299 -0.0090978361 -0.0103891614 0.0046234764 -0.0149836529 -0.0435179944 0.0102286001 -0.0052004530 -0.0125793117 -0.0120724315 -0.0279246879 0.0059734238 -0.0147246803 0.0044866597 -0.0041339964 -0.0011459238 -0.0008677927 -0.0026098787 0.0067099599 0.0060142554 0.0042204619 0.0155210888 0.0021136568 0.0208083161 0.0162267593 0.0328329254 -0.0486590786 0.0020073848 -0.0041330852 -0.0283750305 0.0075610349 0.0055527860 0.0240200005 0.0191407675 0.0156738268 -0.0048155106 -0.0020163715 0.0009746062 -0.0219866701 0.0207660709 0.0225844819 0.0039112939 0.0300623630 0.0270208758 0.0224966188 0.0080849977 0.0113596612 -0.0087412020 -0.0190545301 -0.0143312662 -0.0343439599 0.0259130346 0.0307811393 0.0090634753 0.0453153717 0.0417656458 0.0246134856 0.0126937785 0.0156230001 -0.0040769019 -0.0067822797 -0.0182938507 0.0071358080 -0.0135029487 -0.0456334625 -0.0270462278 -0.0095759232 -0.0476433265 0.0283338992 -0.0108484134 0.0173707328 -0.0341964107 0.0010981303 -0.0677303780 -0.0140834397 -0.0178597748 -0.0446753065 0.0201975020 -0.0190494444 -0.0001731235 -0.0072166199 0.0043955294 -0.0374468203 -0.0528887371 0.0089094555 -0.0938569081 -0.0218808580 -0.0240543211 -0.0603403179 0.0378589541 -0.0262897893 0.0224616950 -0.0119084945 0.0186469253 -0.0480307906 0.0559876587 -0.0126181380 0.0620065304 0.0332192992 0.0025742136 0.0131672217 0.0355250009 0.0000705561 0.0018570983 -0.0050464873 0.0095008377 0.0043631547 -0.0111259008 0.0094034621 -0.0202460185 0.0073163100 -0.0077972188 0.0064867547 -0.0042785529 0.0084588797 -0.0353252092 -0.0128791102 0.0184808375 -0.0017336038 -0.0281072633 0.0286534244 0.0677085999 -0.0647494527 -0.0457003748 -0.0393914404 0.0263293164 -0.0343372505 0.0493470816 0.0420711164 -0.0359260439 0.0720948379 0.0510901480 -0.0032014584 0.0198832227 -0.0759825933 -0.0762144814 0.1318322952 -0.0035822600 0.0392174178 -0.0218620723 -0.0088687335 0.1361981760 0.1572835618 -0.1328343499 -0.0973163713 -0.0894597601 -0.0887226069 0.0214691850 -0.0795670714 -0.0308605442 -0.1245390330 0.0176271104 -0.0058235387 -0.0345538607 0.1700400270 0.0216343171 -0.0196538296 0.0130629980 0.1145369878 -0.1174756812 0.0322808170 0.4893563281 -0.0550027997 0.0627353506 -0.0920638557 0.2381140297 -0.3520603482 -0.2408495650 -0.1636561371 0.2926840079 -0.0050991549 -0.0090837183 -0.0011020590 -0.0002063288 -0.0057206187 -0.0097270476 -0.0024009802 -0.0046833489 -0.0196559543 -0.0069079907 -0.0043784801 -0.0203200543 -0.0085081501 -0.0035992393 -0.0198159459 -0.0105475015 -0.0051438042 -0.0085399620 0.0036376168 -0.0051865838 -0.0087481683 0.0022589258 -0.0065356392 -0.0244156275 -0.0032281839 0.0031177344 0.0009356215 -0.0111788373 -0.0014288932 -0.0234551033 -0.0160470568 -0.0030884258 -0.0040050014 0.0094184285 0.0103660460 0.0194149651 0.0128812063 0.0041572595 0.0277988781 0.0203511069 0.0072128081 0.0265694887 0.0097392226 0.0066096651 0.0168560450 0.0042590084 0.0114671323 0.0070591272 0.0194830289 0.0173946682 0.0160465599 0.0120605094 0.0004835113 0.0258106548 0.0309043506 0.0148879823 0.0107205851 -0.0008448656 0.0037591372 0.0195251224 0.0034180674 0.0186024142 0.0088369639 0.0212557268 0.0004822999 0.0104243413 -0.0230967487 0.0141718001 0.0151777811 0.0490699815 0.0262819585 0.0049716802 0.0209788507 0.0118826385 -0.0033279433 0.0042685811 0.0032539169 0.0351152628 0.0078341730 0.0027881418 0.0313555869 -0.0026608652 -0.0137234866 -0.0092508521 -0.0057643178 -0.0219296394 -0.0334039946 -0.0069721512 -0.0238302018 -0.0346270249 -0.0147870339 -0.0391057638 -0.0824539514 0.0117429983 0.0092428097 0.0495889357 0.0055271843 -0.0025533103 0.0182925352 0.0186749648 0.0171715251 0.0700830704 0.0066008855 -0.0004920796 0.0226526435 -0.0199436500 -0.0127767932 -0.0257886454 -0.0251905246 -0.0035442529 -0.0157314216 -0.0240994274 -0.0083412404 -0.0322311296 -0.0141700625 -0.0084016060 -0.0394866938 -0.0304583135 -0.0075632065 -0.0309037604 -0.0090946415 -0.0088997600 -0.0461521028 -0.0267081575 -0.0011872956 -0.0171753581 -0.0135751039 -0.0051030134 -0.0333358847 -0.0332999507 0.0041525180 -0.0097720678 -0.0054455545 -0.0023967577 -0.0371146792 0.0148001354 -0.0117898082 0.0299466807 0.0023916843 -0.0292530233 0.0443455798 0.0086016167 -0.0287594677 0.0501317218 0.0559499603 0.0091562310 0.0376312943 -0.0127369322 0.0264075606 -0.0478658837 0.0008651025 0.0225459748 -0.0589160255 -0.0243413018 0.0372349882 -0.0447364208 -0.0114480556 0.0304040021 -0.0525278804 0.0001699069 0.0081928501 -0.0052819559 0.0002431649 0.0162786448 0.0122258835 0.0008399321 0.0162383937 0.0120999336 -0.0112725347 0.0140426177 0.0084679034 -0.0097089104 0.0092230557 -0.0053297500 -0.0041205065 0.0082400865 -0.0055284774 -0.0019942900 0.0069360074 -0.0066328736 0.0183941906 -0.0043404120 -0.0223750779 0.0027171344 0.0025114316 -0.0108573324 0.0229841137 -0.0062531050 -0.0238187344 -0.0090137200 0.0135430540 -0.0016323054 -0.0151413575 0.0152179556 -0.0139493608 -0.0142333638 -0.0018891415 0.0140543273 0.0038984572 -0.0139958757 0.0280153272 -0.0359334910 -0.0171124013 0.0130388844 0.0329352412 0.0356928287 0.0843187931 -0.0900988442 0.0167634660 0.0601166399 -0.0662538422 0.0354538586 0.0545348854 0.0211274135 0.0557889858 0.0244968560 -0.0247659287 0.0201900615 0.0281087798 -0.0681082182 0.0620252535 0.0617996857 -0.0287575602 0.0837578194 0.0512826632 0.0125443246 0.0473336883 0.0200201738 -0.0236811605 -0.0222593265 0.0117623596 -0.0886818893 0.0706702948 0.0741071813 -0.0278986417 0.1231157211 0.0666084304 0.0383156564 0.0281606125 0.0372824410 -0.0159897756 -0.0312072098 -0.0477076852 0.0301892253 -0.0633124632 -0.0843999505 -0.0334101099 -0.0665852769 -0.0638316728 0.0806816344 -0.0767527833 -0.0040382330 -0.0227343464 -0.0616032996 -0.0524383301 0.0048008707 -0.0955636015 -0.0897398465 0.0566991623 -0.0908927730 -0.0590619287 0.0345881639 -0.0511878478 -0.0113259881 -0.0380796753 -0.0530790736 -0.0596852920 -0.0019611918 -0.1176304097 -0.1070008777 0.0713916379 -0.0999069103 -0.0591397987 0.0484707928 -0.0164469974 0.0228501815 0.1255855887 -0.0709906397 0.0430214076 0.0190641529 0.0443993513 0.0196207598 0.0245839491 0.0288457995 0.0159391428 -0.0036739730 0.0017356306 0.0036543363 -0.0295488041 0.0089377750 0.0194136355 -0.0297340080 -0.0062109950 0.0337025885 -0.0033654470 -0.0251297601 0.0269316976 0.0149796815 -0.0567030010 -0.0028936195 0.0540875729 -0.0528088429 -0.0839612418 0.1321574915 0.0986326132 0.0875804811 -0.0244569767 0.0503414386 -0.1077880410 -0.0202813240 0.0009839728 0.0503579410 -0.0329405934 0.0207666104 0.0176640465 0.0779396423 0.0428500967 -0.1458102048 0.0350908350 -0.0329271610 -0.0504513230 0.0874877768 -0.1513201943 -0.1424548628 0.1438735848 0.1134570128 0.1501452639 0.1450365362 0.1227457484 0.2541145329 0.2275318738 0.2331600554 -0.0502213251 -0.0047510797 0.0258667374 -0.2808895585 -0.0267735496 0.0581266734 -0.1287841169 -0.0933520234 0.2112110641 -0.0524344480 0.0006233263 0.0013375795 0.0009430420 -0.0481498450 0.0436986263 -0.0210041035 -0.0624974806 0.0340883428 0.0446527584 0.0003284532 -0.0006730254 -0.0103859366 0.0026434855 -0.0036857240 -0.0106859417 -0.0005628068 -0.0126018207 -0.0018256338 0.0020168929 -0.0183923891 0.0047113157 -0.0024998403 -0.0239710912 0.0107298634 -0.0017349062 -0.0167906215 0.0041872159 0.0086696139 0.0051388695 -0.0183926322 -0.0016560152 -0.0088394368 -0.0024570059 0.0091065599 -0.0035964958 0.0017709262 -0.0084162240 -0.0343819910 0.0184735209 -0.0020029820 -0.0263298382 0.0081814796 0.0020823624 -0.0040468703 0.0104925544 -0.0005028752 -0.0072435929 0.0170195887 -0.0030999715 -0.0100343476 0.0170619414 -0.0072510212 -0.0063523412 0.0142238873 -0.0097195045 0.0008775009 0.0056175020 0.0068812146 -0.0038108508 0.0101281698 0.0011224292 -0.0036257807 0.0207456964 0.0007118486 -0.0066062508 -0.0011165497 -0.0108521348 -0.0074075472 0.0151295635 -0.0156423995 0.0047503047 0.0001561638 0.0173493552 0.0046104592 -0.0014000562 0.0059387989 0.0058331332 0.0005421370 0.0173552811 0.0005182606 -0.0049506693 -0.0110240208 -0.0075128173 -0.0180797792 -0.0007124080 0.0159874262 0.0193424911 -0.0088725839 0.0199303194 0.0257560073 -0.0001746109 -0.0043315011 -0.0054048352 -0.0087272438 -0.0190417990 -0.0160274997 0.0060632974 -0.0122289104 -0.0243500620 -0.0099711229 -0.0386783451 -0.0449567498 -0.0147701917 0.0130343522 0.0345723918 -0.0144334354 -0.0066738187 0.0142812554 -0.0188325319 0.0168198435 0.0421826097 -0.0204154348 -0.0155804221 0.0141151507 0.0173675060 -0.0030937670 -0.0190345913 0.0161471737 -0.0028826480 -0.0214151289 0.0272461837 -0.0090192889 -0.0230190410 0.0072762794 -0.0009499398 -0.0114966778 0.0425700335 -0.0144508094 -0.0271615966 0.0090981260 -0.0023376203 -0.0119066992 -0.0106203335 0.0085322759 -0.0051799915 -0.0239465909 0.0137217119 0.0057604329 -0.0272930851 0.0161553386 0.0029004533 -0.0533831794 0.0263235684 0.0241414845 -0.0201053924 -0.0108546975 -0.0442832494 0.0028793909 0.0252574718 -0.0734827021 -0.0264904914 -0.0217814181 -0.0445403131 -0.0380675214 -0.0503138459 -0.0697813880 -0.0074207765 0.0975756661 -0.0151792360 0.0577064948 0.1502201449 -0.0412011489 -0.0860549407 0.1460804338 -0.0415433085 0.0432525866 0.0844076180 -0.0082224689 0.0180322473 -0.0236504661 0.0230603142 0.0642892480 -0.0147480642 0.1145596273 0.0421535063 -0.0294288289 0.0749278216 0.0727329509 -0.0707866109 -0.0524408503 0.0723365284 -0.0532471524 -0.0305588230 -0.0096091627 -0.0635533790 -0.0276060972 -0.0127740520 -0.0595973382 -0.0377066929 -0.1299548234 0.0112062600 0.0826888416 -0.0290392184 -0.0179639970 0.0237109860 -0.1695361980 0.0286714095 0.0947070785 -0.0482104672 -0.1056600718 -0.0167913806 0.0971574229 -0.0727337236 0.0120425712 0.0105308149 -0.0107933836 0.0143924091 -0.0283958601 0.1012591571 0.0422870269 0.0123826815 0.0029364979 0.0189686693 -0.0150076766 0.0021184787 -0.0055025379 0.0046275185 -0.0020302409 0.0121640531 -0.0005136569 0.0001761957 0.0047031359 -0.0096283256 0.0046418853 -0.0108417089 -0.0047752721 0.0026576957 -0.0017002249 -0.0021634471 -0.0000401200 0.0013379011 -0.0080605930 0.0035690689 -0.0086839753 -0.0070216950 0.0056189816 -0.0075852111 -0.0034145370 0.0016586928 0.0002977083 0.0018860845 -0.0022053111 0.0065308626 -0.0105568329 0.0058453469 -0.0121894264 -0.0127810406 0.0002730544 -0.0073172756 -0.0066902221 -0.0046947343 -0.0020509767 -0.0025441876 -0.0084642433 0.0063228198 0.0039860252 -0.0100703882 0.0157862218 0.0037292239 -0.0016849593 -0.0188689158 0.0102612947 -0.0073085119 0.0307490578 0.0087103418 -0.0139152056 0.0077523001 0.0047921943 -0.0083971144 -0.0156250884 0.0107609868 -0.0022328033 0.0157039107 0.0128602109 -0.0068318224 0.0477464760 0.0122682733 -0.0200849391 0.0146816929 0.0000261784 -0.0080448227 -0.0285608403 0.0153162577 0.0022575998 0.0266576350 0.0001443361 0.0041422614 -0.0409757657 -0.0028501122 0.0047269344 -0.0098049041 -0.0022272125 0.0013125129 0.0108453100 0.0153751160 -0.0085137735 -0.0078535204 -0.0048351630 -0.0061169123 0.0185433652 -0.0168414266 -0.0060189913 0.0151359982 0.0031044606 -0.0316079701 0.0443323070 0.0032552365 -0.0270044826 -0.0199832401 0.0130652172 -0.0221666345 -0.0227136041 0.0266547220 0.0705444262 0.0246638878 -0.0169469249 0.0019687965 -0.0493167954 -0.0286196881 0.0215857282 -0.0137187311 -0.0100853096 0.0199311837 -0.0059678745 0.0707010500 0.0261170910 -0.0438429489 -0.0146960057 -0.0202525725 0.0598077921 -0.0291503011 -0.0696444429 -0.0779875722 0.0727940289 0.1101077612 0.1023116862 0.0435759487 0.0353439338 0.0730662616 0.0149609163 0.1638503288 -0.0497199143 0.0109294550 0.0099114440 -0.1234708105 -0.0102656274 -0.0157303046 -0.0189529623 -0.0806058734 0.0506945536 -0.0419652748 -0.1838283323 0.0293760003 -0.0372434850 0.0527479342 -0.0596776634 0.1546590441 0.1175656995 0.0870584906 -0.1254653015 -0.0184288121 -0.0145618503 0.0086950367 -0.0310012232 0.0406170607 -0.0147083477 -0.0292811592 0.0774360707 -0.0530431016 -0.0657606572 0.0707963198 -0.0542577275 -0.0506078164 0.0420619027 -0.0527950995 -0.0553204418 0.0102911429 -0.0204682173 -0.0489009458 0.0456216199 -0.0274979245 -0.0049065822 0.0839002303 -0.0845409701 -0.0925741583 0.0380189095 0.0033469517 -0.0339472791 0.0426734093 -0.0462820494 -0.0830118736 0.0197153811 0.0038031895 0.0242712102 0.0109670093 -0.0053604687 0.0326545482 0.0332126264 -0.0228345185 0.0561897201 0.0624207545 -0.0286224857 0.0446610689 0.0593117740 -0.0420335273 0.0479250697 0.0294825787 -0.0210403831 0.0302867322 0.0118289772 -0.0070939836 0.0205370088 0.0190984864 -0.0439916027 0.0676616601 0.0430112900 0.0286294482 0.0326541624 0.0711489201 -0.0447037630 0.0651631226 0.0422767573 0.0034546820 -0.0733060874 0.0091425015 0.0300035001 -0.1272097787 0.0246631929 0.0418680386 0.0398491749 0.0092816311 0.0475971729 0.1008591373 0.0429651873 0.0756786531 0.0560807769 -0.0363768493 0.0415642838 0.0943417708 -0.0593314779 -0.0007673497 0.0395047721 -0.0098012392 0.0108792941 0.0599429773 0.0093166070 -0.0594644394 0.0068012908 -0.0026680927 0.0251957088 0.0348304207 0.0296420775 -0.1086795341 0.1321424677 -0.0137503153 0.0069437790 0.1105958152 0.0142029258 -0.0378605931 0.1680266292 -0.0044816730 0.0411781158 0.1300944563 0.0417162451 -0.0507624629 -0.1231198737 -0.0174876178 0.0236884523 -0.1286604760 0.0037665033 0.0626286028 -0.1675176359 0.0130316862 0.0231318721 -0.0532073799 -0.0216072561 -0.0457770188 -0.2453977788 0.0380086827 0.0456084718 -0.0420137318 -0.0186012359 -0.0670278575 -0.0233763392 -0.0334712243 -0.0055237662 0.0720931432 -0.0690183415 -0.0953881008 0.0241922901 -0.0487444191 -0.0168402411 0.2143024881 -0.1139339469 -0.1809027621 -0.0071100936 -0.0103917129 -0.0232622743 0.0562609059 -0.0363485574 -0.0067534153 -0.0200357109 -0.0128569133 -0.1028885303 -0.0659368557 0.0184105279 0.0084341509 0.0103604423 0.0283365178 0.0240414865 0.0244581208 0.0476106403 0.0214803740 -0.0137512551 0.0472024738 0.0198060405 0.0372456585 0.0245798409 0.0229130732 -0.0026614138 0.0020954991 0.0040654246 -0.0053569296 0.0043870928 0.0048636964 -0.0035769193 0.0048782230 0.0063320478 -0.0062001587 0.0044531113 0.0014088642 -0.0064913770 0.0033650254 0.0042602419 0.0050083207 -0.0009471176 -0.0138732307 0.0002094117 -0.0000654240 -0.0090745580 -0.0030712314 0.0025353570 -0.0108205872 -0.0010955072 0.0030833463 -0.0105922944 -0.0077289693 0.0050294058 -0.0087139935 0.0099543163 0.0044808049 -0.0136397489 -0.0061993327 0.0018559056 0.0021062278 0.0044986170 -0.0030657651 0.0006289662 0.0141221831 -0.0131944823 0.0051217612 0.0128104747 -0.0026616985 -0.0008670212 0.0522514039 -0.0311840370 0.0449524397 0.0326967772 -0.0252545292 -0.0191342454 0.0307807311 -0.0255041072 -0.0203258722 0.0173339041 -0.0141157422 -0.0062648217 0.0233155526 -0.0234528243 -0.0154733151 0.0286611949 -0.0198759154 -0.0220613139 0.0265938341 -0.0199664666 -0.0182521231 0.0185902247 -0.0224591006 -0.0159713746 0.0226628811 -0.0157836125 -0.0137692935 0.0260525760 -0.0187933921 -0.0212558737 0.0330738256 -0.0302298770 -0.0092588795 0.0264148846 -0.0161359062 0.0222980128 0.0053217983 0.0145474961 0.0149643377 -0.0299800236 0.0444768714 -0.0208247394 0.0058228667 0.0396216091 0.0064911051 -0.0353380174 0.0407859094 0.0244180622 0.0005513322 0.0388885171 0.0018546349 -0.0161002600 0.0568339890 0.0180259810 -0.0338165727 0.0510435015 0.0277328704 -0.0185249409 0.0294077940 0.0078984252 0.0066826391 0.0347195897 0.0007594802 -0.0184002284 0.0758868320 0.0134397616 -0.0394426437 0.0552473271 0.0316288237 -0.0210858285 0.0086766022 0.0013866556 -0.0464155614 0.0335052957 0.0299200103 0.0274001046 -0.0260527825 -0.0311519414 0.0285715375 -0.0287916188 -0.0258739260 -0.0030713935 0.0034137387 0.0010949725 -0.0466405210 -0.0085605616 -0.0281723485 -0.0330669929 -0.0202874586 -0.0062192344 -0.0076062161 -0.0619059017 0.0197801115 -0.0198304979 -0.0435014638 0.0329416349 -0.0226047043 -0.0514100981 0.0032218084 -0.0406456645 0.0652737578 0.0811014472 0.0099749527 0.0562318923 -0.0624037296 -0.0250066058 0.0112246845 -0.0131182746 0.0459324859 0.0246099105 -0.0199225108 -0.2125449202 -0.1704377708 0.0490227438 0.0658015261 -0.0553581275 -0.2650739974 0.1177385125 0.0822903488 0.1683332765 -0.0698748089 0.0543832431 0.1729826349 -0.0506020211 0.1192289633 0.1187367492 -0.0109047961 0.1509383377 0.0019496008 0.0678771992 0.0786440013 -0.1916187220 0.0387821696 0.0067538989 -0.1194126604 -0.0339933946 0.2157688838 -0.0020632110 0.0082604999 0.0098647889 -0.0480116933 0.0785116862 0.0447474444 0.0562249830 0.1094764320 0.0260062425 -0.0791838147 -0.0001928132 -0.0004674410 -0.0021620461 0.0064668657 0.0023782771 -0.0092649238 0.0060049252 0.0011059530 -0.0109207076 0.0047621358 -0.0043113121 -0.0059771963 0.0004812549 -0.0061272440 -0.0012308364 -0.0007434783 -0.0053293576 0.0016515465 0.0114562070 0.0058963335 -0.0115316432 0.0079187689 0.0051759394 -0.0150138440 0.0077354294 -0.0020852540 -0.0019146589 -0.0044141251 -0.0101255770 0.0006178330 -0.0025484692 -0.0107500378 0.0055650855 0.0038640108 -0.0010927106 0.0089161617 0.0021962067 -0.0028035158 0.0150793764 0.0020781714 -0.0050027494 0.0151871033 -0.0015773448 -0.0055764811 0.0121095850 -0.0043954946 0.0010653817 0.0036763830 0.0099220105 -0.0004425740 0.0083404094 0.0020298389 0.0000492942 0.0162135701 0.0054277877 0.0013913193 0.0010797373 -0.0057847156 -0.0083481985 0.0138253284 -0.0083852368 0.0042253891 0.0003197002 0.0149387940 -0.0004328522 -0.0005555345 0.0030500996 0.0011101516 0.0015498965 0.0158789110 0.0154275992 -0.0063872580 -0.0018901134 -0.0038559820 -0.0086186744 -0.0043624140 0.0049470024 0.0058317852 -0.0071054169 0.0064115972 0.0072221135 -0.0043112656 -0.0031184375 -0.0035070327 -0.0076115398 -0.0080876839 -0.0036309543 -0.0014970563 -0.0065745736 -0.0117821089 -0.0075621309 -0.0152993750 -0.0127457235 -0.0100968789 0.0033944431 0.0128964718 -0.0094661262 -0.0029607733 0.0093336749 -0.0125426036 0.0048756261 0.0156743479 -0.0110427670 -0.0049490041 0.0126781928 0.0000546844 -0.0010306644 -0.0112948312 -0.0022399608 0.0000755193 -0.0119310354 0.0010350009 -0.0020681952 -0.0123248149 -0.0025987048 -0.0024111967 -0.0111670270 0.0042983911 -0.0030360599 -0.0125020068 -0.0008443013 -0.0041014337 -0.0109692640 -0.0095941646 0.0009992255 -0.0089486235 -0.0103172029 0.0005457794 -0.0080941983 -0.0149905811 0.0029856746 -0.0072831410 -0.0157372696 0.0024248388 -0.0048292199 0.0439485356 -0.0915903393 0.1273581862 0.1598346449 -0.2865092254 0.2722473888 -0.0181888188 -0.1708621824 -0.0224032965 0.0756350322 0.1324797851 0.2846140011 -0.0450549848 0.0661648332 -0.1055330324 0.0009511290 0.0401070063 -0.1484606346 -0.0982022963 0.1251927038 -0.0862431537 -0.0285407139 0.0953400961 -0.1464136404 -0.0023107533 -0.0044205931 -0.0015428161 -0.0054779685 -0.0081289159 -0.0150786617 -0.0039089822 -0.0064043610 -0.0104239577 0.0013954627 0.0004062224 0.0054648525 -0.0000063073 -0.0015689841 0.0051462474 0.0037302674 0.0039723862 0.0064933447 0.0051852833 0.0024693182 0.0092720666 0.0089733818 0.0015910440 0.0027068937 0.0030786076 0.0010866792 0.0038737312 0.0115022854 0.0004856715 0.0021798804 0.0108616429 0.0058059308 0.0018868612 0.0007864293 -0.0036315203 0.0031852273 0.0048405254 0.0030447072 -0.0127634316 -0.0046591102 -0.0023141927 -0.0296537303 0.0138074436 0.0153303887 -0.0121723682 -0.0160506943 -0.0022446503 -0.0104253170 0.0087312870 0.0037622182 0.0060703047 0.0019141707 0.0021334041 0.0024184188 -0.0148945979 -0.0028931597 -0.0093571588 -0.0090274980 0.0068921028 -0.0049019361 0.0055200659 -0.0074943613 0.0062638818 -0.0047372400 -0.0089044032 -0.0008740201 -0.0138214498 0.0034973701 -0.0044641169 -0.0098466738 0.0120612040 -0.0041014985 0.0155101913 -0.0121938961 0.0117042000 -0.0055700295 -0.0123410031 -0.0042580631 -0.0157481386 -0.0030856951 -0.0066247673 -0.0081010801 -0.0011260018 -0.0089084268 -0.0054286715 -0.0029135771 0.0022787515 0.0298720030 -0.0207507291 0.0594134258 -0.0228507290 -0.0113182553 -0.0729182725 0.0366704904 -0.0291963127 0.0738512051 0.0391856033 -0.0265702650 0.0691879172 0.0039554234 -0.0171557340 -0.0109370738 0.0096060619 -0.0215786182 0.0091199018 0.0484401445 -0.0328209276 0.0985175363 0.0562533329 -0.0360994241 0.1062553345 -0.0081972594 -0.0135882368 -0.0356945971 0.0046436335 -0.0194976950 -0.0031827701 -0.0617693356 0.0011324041 -0.1648872648 -0.0123386912 0.0020288704 0.0034977283 -0.0121575872 0.0043424525 0.0015760144 0.0007119450 -0.0008175486 -0.0010447780 -0.0179102079 -0.0175386326 0.0270904326 -0.0590709409 -0.0192752587 0.0159062012 -0.0532232348 -0.0031678397 -0.0494803538 -0.0657781329 -0.0223992174 -0.0158430286 -0.0036211928 0.0524984054 0.0716330896 0.0191357965 -0.0044528036 0.0047541940 0.0641339765 -0.0337327503 -0.0065792013 -0.0321495680 0.0246526916 0.0454658514 0.0970083039 0.0617389481 0.0130597647 -0.0019214531 -0.0600637880 0.1513213145 -0.0146191304 0.1670720828 -0.0429116866 0.0886279346 0.1473022067 0.1856872746 0.1070753304 0.0586651529 0.0254049564 0.0490129170 -0.0957360852 0.0404737705 -0.0234077521 0.0561959736 -0.0337218547 0.1191182869 0.0399257795 0.0796670939 0.1154403776 -0.1250639848 -0.0891649277 0.1237214823 -0.0325265515 0.0074352653 0.2271704296 0.0208885002 -0.0062067031 0.0912553156 0.2026718824 -0.0153188887 0.0781709836 -0.0124120469 0.0317113479 -0.0015882750 -0.0025726040 0.0017574802 -0.0028099102 -0.0009225048 0.0028131030 -0.0001728293 0.0037224865 0.0023601099 0.0023791451 0.0059947283 0.0007047027 0.0039218477 0.0051126480 -0.0001911831 0.0021866107 0.0004037652 -0.0000214720 -0.0053527989 -0.0029290575 0.0043278126 -0.0016718282 0.0056061878 0.0032334350 0.0007270225 0.0007822250 -0.0008963590 0.0069494528 0.0072697234 -0.0010566896 0.0038254768 -0.0002121610 -0.0013732048 -0.0023273951 -0.0061420595 -0.0051977728 -0.0030674989 -0.0054836656 -0.0073632741 -0.0047262287 -0.0077342624 -0.0070028984 -0.0026579193 -0.0031477958 -0.0044229798 -0.0036866847 0.0006669485 -0.0025730490 -0.0052280777 -0.0103957761 -0.0033574182 -0.0031785647 -0.0022365105 -0.0063084360 -0.0084142590 -0.0083569908 -0.0039888447 0.0014042823 -0.0020902551 -0.0054375556 -0.0058373024 0.0030830030 -0.0043684309 -0.0050768731 -0.0018035358 -0.0008315479 0.0039694039 -0.0043073681 -0.0018845053 -0.0158063331 -0.0079280844 -0.0047312709 -0.0055163730 -0.0068127511 0.0001791932 -0.0029631501 -0.0039158000 -0.0070469279 -0.0012585314 -0.0028982879 -0.0046682017 -0.0017750077 0.0010509651 0.0037726209 -0.0004689764 0.0038556600 0.0095981188 -0.0012697846 0.0036030362 0.0101185404 0.0013170956 0.0092567529 0.0218578942 -0.0023386416 -0.0050281975 -0.0110116990 -0.0016354010 -0.0016170262 -0.0045220242 -0.0037243133 -0.0071180033 -0.0164468440 -0.0014191515 -0.0015802555 -0.0073482632 0.0101806698 0.0030277617 0.0079937261 0.0112218589 0.0011490012 0.0053709383 0.0104921644 0.0034717853 0.0095042013 0.0060486586 0.0062445334 0.0129770943 0.0116112870 0.0028898101 0.0082497564 0.0026094411 0.0079133986 0.0152477503 0.0119635392 0.0024274100 0.0066322880 0.0061777162 0.0054521504 0.0118181997 0.0146637548 0.0013655669 0.0057647536 0.0023727875 0.0060591604 0.0140197207 -0.0250047912 -0.0354748647 -0.1437362284 0.2305198235 -0.1300216263 -0.0846251958 -0.0760664594 -0.0426717402 -0.4627633535 -0.2693340972 0.0705261544 -0.0224800025 0.0346792216 0.1121870315 0.0250100725 0.0894812604 0.1835905843 0.0132008529 -0.0519962069 0.1733195282 0.0061688424 0.1283879843 0.0961252548 0.0263472966 -0.0003060737 0.0055797221 -0.0015886693 -0.0009212671 0.0053829796 -0.0034637953 -0.0014932526 0.0060319688 -0.0019960178 -0.0054809103 0.0028917835 0.0002350501 -0.0015919617 0.0066768994 0.0002208451 0.0014707025 -0.0069770522 -0.0051628413 -0.0078060435 -0.0002670626 -0.0017602016 0.0002302395 -0.0073242406 -0.0043067348 0.0065548198 -0.0104754152 -0.0076525989 0.0021280156 -0.0082547229 -0.0051823679 0.0019088324 -0.0058176145 -0.0035286051 -0.0007829984 0.0061468853 -0.0005570230 0.0086100029 0.0018852191 -0.0000728997 0.0029728583 0.0110343591 -0.0048267745 0.0235285657 -0.0006316702 -0.0055293350 -0.0717320002 0.0487661470 -0.1138495448 -0.0550659006 0.0284548695 -0.0220914177 -0.0386278027 0.0230882279 -0.0005520603 -0.0213997140 0.0153299536 -0.0177319242 -0.0495880375 0.0318106544 -0.0422738928 0.0139332128 -0.0099720917 0.0859942679 0.0037295528 0.0010700341 0.0559314943 -0.0085315352 0.0151100788 0.0139481072 -0.0699938018 0.0322890954 -0.0809663927 0.0497929405 -0.0289972455 0.1435930136 0.0224546961 0.0025512323 0.0878401087 -0.0457610755 0.0348478550 -0.0761339807 0.0046544896 0.0089206242 -0.0354675418 0.0285392003 -0.0146926759 0.0224930445 0.0402556439 -0.0189360432 0.0164007966 0.0062471740 -0.0426512114 -0.0542741611 0.0515567983 -0.0476812670 0.0297023880 0.0502305209 -0.0260693146 0.0260952713 0.0235385440 -0.0289565667 -0.0152223599 0.0302161864 -0.0510781050 -0.0044216280 0.0736192708 -0.0586276095 0.0401839802 0.0618114956 -0.0294131381 0.0533798493 0.0074861262 -0.0205563767 -0.0208389181 0.0299170002 -0.0540117794 -0.0059739246 -0.0234999173 -0.0399597630 -0.1050579172 0.0282618893 -0.0086616276 0.1143181648 0.0309705234 -0.0177365379 0.0673511683 0.0053811150 -0.0100207257 -0.0011170001 0.0564982733 0.0208156558 0.0042161314 0.0397539175 0.0139298308 0.0063737432 0.0145340186 0.0297524979 0.0684269804 0.0012226076 0.0071534513 0.0032580464 -0.1084320563 -0.0835297678 -0.0260722319 -0.0590059841 0.0079198321 -0.0077839657 -0.0685362630 0.0094068371 0.0032397517 0.0140671634 0.0212307739 -0.0300367416 0.0274455199 0.0106510348 -0.0124405363 -0.4266471605 -0.2923551916 0.0597851307 0.0597241575 -0.1947728834 -0.3998012401 0.0069229831 0.1694221092 0.2164343611 0.0260151200 0.0746708275 0.0785010979 -0.0405816766 -0.1039142579 -0.1215271973 -0.2242270745 0.0481964056 0.0028970280 -0.1184056756 -0.0511279316 -0.0519911683 -0.1128208477 0.0879787166 0.0706084425 -0.1111895388 -0.0034157859 -0.0120393345 -0.0306129334 0.0237422003 -0.0102542436 0.0498924266 -0.0184164160 0.0454058767 0.0720888228 0.0229056888 -0.0541912198 0.0008190232 0.0032267822 -0.0024303727 0.0011544230 -0.0024254331 -0.0000760705 -0.0000859876 -0.0067324125 0.0032693179 0.0018268950 -0.0060788971 0.0029976203 0.0011466250 -0.0026475606 0.0017241134 0.0021494814 0.0016424332 -0.0010688365 0.0026588302 -0.0037027007 0.0018289860 -0.0017080843 -0.0088745618 0.0062838911 0.0045449273 -0.0016506109 0.0007386255 -0.0001930776 -0.0024017571 0.0008686139 0.0038041088 0.0027533400 -0.0032457066 0.0062714892 -0.0001383704 0.0040032876 -0.0027751612 0.0109931625 0.0094505233 -0.0069171547 0.0109392767 0.0097797876 -0.0082651716 0.0015748319 0.0065602195 -0.0004734180 -0.0102075956 0.0004753813 0.0145549299 0.0005759325 0.0032430965 -0.0022359932 0.0168420165 0.0120079406 0.0009234791 0.0055166343 0.0017870411 -0.0157182937 0.0005587935 0.0079739854 -0.0006968250 -0.0181976013 -0.0020980324 0.0061458694 0.0012963606 -0.0007550542 0.0047119834 0.0011627627 -0.0006232008 0.0178226648 0.0102647461 -0.0006901311 -0.0080085091 -0.0048051797 -0.0097012206 -0.0039355228 0.0039684006 -0.0001946674 -0.0063480811 0.0038419424 0.0003214701 -0.0039149428 0.0020359344 -0.0009639849 -0.0054069525 0.0002552503 0.0000431886 -0.0027983938 0.0014555569 -0.0022588223 -0.0046174503 -0.0020307743 -0.0004778731 -0.0081067549 0.0028311116 0.0016471161 -0.0075903567 0.0012382106 0.0019588839 -0.0096655929 0.0031605040 0.0022201126 -0.0083471305 0.0002639640 0.0032200779 -0.0133303558 0.0002620548 -0.0001076438 -0.0109784606 -0.0001137221 0.0003015604 -0.0094620989 -0.0012894967 -0.0053005936 0.0020573290 -0.0059487341 -0.0128253243 -0.0101164105 -0.0018155597 -0.0063064402 0.0123450363 -0.0105561688 -0.0200431622 -0.0127305537 0.0017833698 0.0007768159 -0.0022700574 -0.0027449242 -0.0083134789 -0.0162266418 0.0043811630 0.0043134538 0.0030586785 -0.0034258399 -0.0113298736 0.0230923639 0.0593028088 -0.0172165825 -0.0069107914 0.0791648705 -0.0307868513 0.0417830786 0.0911519156 -0.0020782280 -0.0016720344 0.0309639694 -0.0331191544 0.0187566486 -0.0209033534 -0.0538811480 0.0151146944 -0.1011062934 -0.0841960199 0.0416616056 -0.0333095798 -0.0430278977 -0.0494884190 0.0132489967 -0.0841352045 -0.0006019364 0.0357244915 -0.0239185269 -0.0066711462 0.0251631276 -0.0604435676 -0.0119360680 0.0342132921 -0.0389291010 -0.0364699130 0.0198982180 0.0127146699 -0.0037990223 0.0500923966 0.0062029303 0.0120738845 -0.0615009707 -0.0382729264 -0.0753479935 0.0003715942 0.0093342509 0.0224411110 -0.0695219136 -0.0300180040 0.0832258789 -0.1115137531 -0.0696269965 0.0549380702 -0.0892731069 -0.0499545715 0.0153979744 -0.0392709265 -0.0316874220 0.0071630899 0.0474011097 0.0040818996 0.0630168231 0.0297016626 0.0090950503 0.0862610572 0.0572006496 0.0562181892 0.0832582157 0.0309224123 0.0062848816 -0.0735733562 0.0305158401 -0.0376444857 -0.0001521176 -0.0214054194 -0.0194941436 0.0056489109 -0.0183068500 -0.0188397676 0.0023365628 0.0147740921 -0.0290120386 0.0005246971 -0.0167380957 -0.0305515222 0.0180758231 -0.0117868050 0.0060809247 0.0209330781 0.0026295581 -0.0102495638 0.0170100158 -0.0050199325 -0.0253393438 -0.0035589405 -0.0187204649 -0.0402602293 0.0187720081 -0.0136186817 0.0319047219 0.0229151455 0.0050762964 -0.0055211608 -0.0477258880 0.0131987410 -0.0392722941 -0.0316479502 -0.0096041545 -0.0056710351 -0.0239185891 -0.0170914391 0.0019442551 -0.0319041045 -0.0175100936 0.0429429640 -0.0155043918 0.0331189739 -0.0317845464 -0.0255753770 0.0132318341 0.0693235318 -0.0127561477 -0.0281689605 0.0500135119 -0.0035954743 -0.0051528018 -0.0024069103 -0.0136371940 0.0371939365 0.0299701470 -0.0396638284 0.0244691423 0.1025442890 0.0000826892 -0.0491201198 0.0758831402 0.0136599995 -0.0182826152 -0.0262005173 -0.0119271372 0.0587813926 0.0352360687 -0.0176785966 0.0517258016 -0.0886808864 0.0615036049 -0.0220918916 -0.0392693660 0.0623758475 -0.0380913494 -0.0287024722 0.0774988828 -0.1247462787 -0.0076963043 -0.0213477836 -0.0073913658 0.0080573997 -0.0129529278 -0.0004060980 0.0001790575 0.0002286898 -0.0120110207 -0.0170280461 0.0131791334 -0.0105670880 -0.0305273325 0.0569892711 0.0432273857 0.0462992892 0.0196458125 0.0424981053 -0.0042757530 0.0177954127 -0.0281492694 -0.0167016451 -0.0115174332 -0.0023987646 0.0023668762 -0.0466673630 -0.0077203011 0.0061368454 0.2468808110 0.1089917807 0.0369381033 -0.0386424233 0.1096607085 0.2545519764 -0.0376902901 -0.0409476137 -0.0606329162 0.0483093548 0.0673457664 0.0527303248 0.0293692222 0.0155788756 0.0161120443 -0.0002792449 0.1014105643 -0.0482114422 0.0354999810 -0.0059330858 0.0058134357 0.0300635466 -0.0537518397 -0.0061011287 0.0124510667 -0.0478782986 -0.0264274420 -0.0775666378 0.0007190556 0.0092285418 -0.0461098819 -0.0426343441 0.0111199179 -0.0433947305 0.0127769513 0.0028402229 0.0075190414 0.0206784618 -0.0216527859 0.0111566013 -0.0063858560 -0.0096274001 0.0021808056 -0.0385095128 0.0204083742 0.0152255314 -0.0428867449 0.0271423521 0.0087065680 -0.0290602313 0.0252094853 0.0161200991 -0.0006783139 -0.0000299458 0.0237283279 -0.0016694933 -0.0097819948 -0.0086336096 -0.0455409240 0.0362336248 0.0311477631 -0.0154609462 0.0025172082 -0.0021796455 -0.0371166203 0.0285180561 0.0277332043 -0.0033475696 -0.0107838847 0.0909002566 -0.0407878028 0.0442338680 -0.0111390379 0.0816329947 0.1035053715 -0.0820330766 0.1092294912 0.0982932595 -0.0996573614 0.0317703022 0.0649361323 -0.0081935964 -0.1025211403 0.0012447439 0.1812889079 -0.0434162563 0.0388309223 0.0090106077 0.1354393565 0.1465670034 -0.0039183551 0.0351902133 0.0119108738 -0.1836870188 0.0378013050 0.0748151657 -0.0224959560 -0.1749706324 -0.0362731363 0.0320423066 0.0042729689 -0.0108612521 0.0415298488 0.0016604289 -0.0145199066 0.1881030047 0.0603982054 0.0023027033 -0.0926971714 -0.0940974296 -0.0988658646 -0.0301439279 0.0228515529 -0.0098854522 -0.0433331675 0.0214939207 -0.0020718038 -0.0315991428 0.0271195754 0.0058636820 -0.0378069886 0.0215837373 0.0084027782 -0.0297502771 0.0310283407 0.0160328510 -0.0315184044 0.0178504194 0.0228656289 -0.0529346086 0.0173548332 -0.0107983838 -0.0527681551 0.0157981409 -0.0107846251 -0.0605936087 0.0168141303 -0.0119364563 -0.0567962277 0.0092164626 -0.0176695586 -0.1332852041 0.0152620791 0.0344465333 -0.1040494273 0.0097563235 0.0367127578 -0.0911399097 -0.0011933170 -0.0136800972 0.0425201511 -0.0550132899 -0.0978383100 -0.1015031852 -0.0039490327 -0.0216963781 0.1534185666 -0.1043088085 -0.1757509669 -0.1085482888 0.0242231807 0.0375215073 0.0096348511 -0.0286230879 -0.0586079966 -0.1360861190 0.0460913159 0.0683381241 0.0797246964 -0.0458556119 -0.0997761902 -0.0287105525 0.0000323095 0.0118868465 -0.0731165891 0.0326798092 -0.0112213588 -0.0157366209 0.0098417466 0.0668422339 -0.0029801159 -0.0367545236 -0.0194686599 -0.0080811848 -0.0084507202 0.0433758453 -0.0069216657 0.0442873850 0.0640589603 -0.0103066344 -0.0201629549 0.0214808875 0.0099193206 -0.0372825913 0.0773306504 0.0169606787 0.0053014246 -0.0451184382 0.0368649049 0.0018230654 -0.0151057236 0.0270864853 0.0014743204 -0.0169855705 0.0082800427 0.0007681233 -0.0031822805 0.0109356784 0.0016161820 -0.0332029404 -0.0187043918 -0.0119877723 0.0150703822 -0.0268679521 0.0031745999 0.0170184666 0.0218854038 -0.0273233498 0.0095124805 0.0282445204 -0.0409316444 0.0020399635 0.0488634295 -0.0425886035 -0.0046387229 -0.0350861267 -0.0197850568 0.0166432188 0.0078336730 0.0060732661 -0.0164127964 -0.0227003618 0.0023853807 0.0101329443 -0.0188611950 -0.0444608475 -0.0165159540 -0.0661820241 0.0535232643 0.0347126643 0.0896919870 -0.0388737896 0.0531293161 0.0060130737 0.0105048645 0.0303965615 -0.0030076696 0.0101864518 0.0230654284 -0.0113100567 -0.0118275531 0.0117731882 -0.0081654924 0.0145279394 0.0156779235 -0.0066989412 0.0000837169 0.0130010698 -0.0184278467 -0.0067986839 0.0126036625 -0.0218953093 0.0048652132 0.0108804466 -0.0071137292 0.0169228885 0.0193538984 0.0030364194 -0.0040596910 0.0070188854 -0.0133695916 -0.0117032302 0.0193289912 0.0446551940 -0.0119601212 0.0334846158 0.0233516493 0.0159343674 -0.0083183735 0.0053938045 0.0328467729 -0.0252739093 0.0531392200 0.0151713993 -0.0090291183 -0.0030502822 -0.0336777439 -0.0054350377 0.0518796548 -0.0243112802 -0.0244132338 0.0372110080 0.0248836538 -0.0023008702 0.0038452178 0.0050664636 0.0082742226 0.0181386477 -0.0468177751 -0.0233090274 0.0784557356 -0.0410897741 -0.0422295719 0.0319314871 0.0427526630 -0.0118303567 -0.0224943888 0.0222607842 0.0215883302 0.0126449837 -0.0719362579 -0.0379956016 -0.0284863562 -0.0468775663 -0.0038027960 -0.0550108970 0.0155766928 0.0390473132 -0.0541826059 0.0401651882 0.0480282190 0.0367623552 -0.0598875808 0.0065001712 -0.0123237640 -0.0152052878 -0.0086437320 -0.0103222292 -0.0105807524 -0.0189157640 -0.0227955188 0.0122926270 -0.0387411199 -0.0403373974 0.0376759134 0.0843047882 0.0033391863 0.0113522762 -0.1505162580 0.0210356716 -0.1536223954 0.0086779341 0.0358942651 0.0730834944 0.0595460923 -0.0091113298 0.0023094200 -0.0178362278 0.0481791733 0.0030414065 -0.0134066418 -0.0486833119 0.2003001703 -0.2947540511 0.0206998125 -0.0197643403 -0.1612544982 0.1089486084 -0.1827081500 -0.2459623905 -0.0363931679 -0.2165266190 -0.2359290331 0.0074496834 -0.1022167283 0.0141169570 0.1318263243 -0.3519308392 0.1441121044 0.0612689899 0.1007215307 0.0745353926 0.0643700815 0.0290450448 -0.0366479299 0.0903879869 0.1289500683 0.0961453772 0.0755911273 -0.0013094598 -0.0120265066 0.0555719588 0.0444160414 0.0003737298 0.0584882717 -0.0297445425 -0.0219512975 0.0199189600 0.0264808300 -0.0383407304 -0.0058078871 0.0285544981 -0.0135664557 -0.0130132520 0.0107482754 0.0313136486 -0.0110460609 -0.0029721137 0.0445494408 0.0115861267 0.0046275566 0.0200490032 0.0260864460 0.0264496963 -0.0311858079 -0.0228405403 0.0365526264 -0.0276380489 -0.0232835379 0.0091146930 0.0438920116 -0.0192165324 0.0002907283 0.0076123546 0.0309709881 0.0026534676 0.0306116650 0.0432305214 0.0392335072 -0.0529030897 0.0290885275 -0.0336593479 0.0077593017 -0.0097245008 0.0294182916 0.0051221962 -0.0339196891 0.0530719608 -0.0001207949 -0.0278518257 0.0258590831 -0.0003215734 0.0106712754 -0.0405526105 0.0023775796 0.0497438433 -0.0485271914 0.0115797072 -0.0095648273 0.0478287632 0.0112656807 -0.0121126931 0.0101901619 -0.0008976212 -0.0458421551 0.0392165422 -0.0025296562 0.0145039322 -0.0670249955 -0.0014908761 -0.0593530658 0.0138901326 -0.0146293032 0.0146052532 -0.0063131113 -0.0225803030 0.0325632460 -0.0054804594 0.0089861381 -0.0246518509 -0.0360058909 -0.0128133277 0.0287921122 0.0067059348 0.0118213038 0.0246824194 0.0032703120 0.0104259475 0.0269266171 0.0210071806 0.0175302985 0.0291726730 0.0189943411 -0.0230103541 0.0171532076 0.0288360042 0.0358535074 0.0239262949 0.0207407960 -0.0365394867 0.0360910164 0.0146929548 -0.0045885603 0.0291769173 0.0129392777 -0.0392327834 0.0476890628 0.0155417707 0.0015271423 0.0264752109 0.0058804837 -0.0668836742 -0.0385497588 0.0074200728 0.0298063622 -0.0237740122 0.0047903356 0.0345934705 -0.0226099089 -0.0005408378 0.0203723891 0.0237863227 -0.0175664907 -0.0062937047 -0.0266096762 0.0008753430 0.0213858706 0.0573303292 -0.0306522702 -0.0326470879 -0.0182440031 0.0076977595 0.0336899934 0.0206940193 -0.0107903783 0.0052627474 -0.0234673139 0.0121146340 0.0401962348 0.0471548461 -0.0186430324 -0.0105064842 -0.0063472179 -0.0220296325 0.0081261062 0.0251146100 -0.0632898786 0.0386550026 -0.0165758709 -0.0279906643 -0.0405325196 -0.0251142516 0.0238921755 0.0448419859 -0.0325281674 0.0254068275 -0.1076816393 0.0592812321 0.0537712053 -0.1622136712 -0.1038170402 0.0509163992 -0.1500412291 -0.0522425177 0.0180666993 -0.0918345862 0.0059830696 -0.0207163425 -0.0455889601 0.0151173924 -0.0237593657 -0.0332666108 0.0131279994 -0.0203423364 -0.0243151374 0.0151864465 -0.0007099799 0.0102667350 0.0084183920 -0.0156564561 -0.0207956812 0.0041471549 -0.0027680044 -0.0027350036 -0.0048479067 0.0041223108 0.0197408442 0.0248134791 -0.0048662857 0.0034461188 0.0320487522 -0.0225599984 -0.0088473035 0.0394625943 -0.0149205029 -0.0066612476 0.0073352279 -0.0006835447 -0.0130496448 0.0082939629 -0.0187208682 -0.0101979334 -0.0115323547 -0.0036510138 -0.0254184481 -0.0042914108 -0.0597642316 -0.0533573643 -0.0466687382 0.0747999160 0.0051304176 0.0312727643 -0.0303886310 0.0295239957 0.0275593672 0.0066723118 0.0259713196 0.0109235298 0.0035317870 0.0158794786 -0.0013277766 -0.0242997398 0.0357143955 0.0205606736 -0.0027179971 0.0560613560 -0.0321118466 0.0138298004 -0.0610397214 -0.0287864887 -0.0083402321 -0.0246768418 -0.0226326345 -0.0022636742 0.0112204705 0.0360861499 0.0014163104 0.0879705907 -0.0552458511 0.0275044226 -0.1258466580 -0.0490264450 -0.0095989313 -0.0603012086 0.0316802969 -0.0277160299 0.0522469556 0.0246129120 -0.0071922933 0.0433322832 0.0231169333 -0.0060839325 0.0440037463 -0.0149640436 0.0160812710 -0.0469938363 0.0201970437 -0.0010832527 0.0710534705 -0.0306934794 0.0203285218 -0.0839306119 -0.0326759266 0.0256428606 -0.0695448735 -0.0078361531 0.0127211115 0.0050746826 -0.0117512097 0.0087618431 -0.0218166921 -0.0454572542 0.0248570410 -0.1224944237 -0.0497563587 0.0388659609 -0.1066451074 -0.0044854399 0.0136991843 0.0254852152 -0.0119203056 0.0027092935 -0.0223369653 0.0561671632 -0.0161023153 0.1661569192 -0.0919612137 0.0346047231 -0.0605898691 -0.0970253379 0.0722023456 -0.0230600635 0.0328493805 -0.0418333944 0.0007293887 0.0457063071 0.0135300236 0.0089824879 0.0190309420 0.0093862101 0.0178563410 0.0054275387 0.0201349926 0.0232282818 0.0124377727 -0.0184042059 -0.0272740722 -0.0718048584 -0.0632554350 0.0525518594 -0.0357658541 0.0832974625 0.0122090990 -0.0390006350 -0.0166963469 -0.0325951465 0.0235959919 -0.0032431027 0.0247419188 0.0304329929 0.0092140933 0.0101224164 -0.2604993777 -0.2931872702 0.1781105572 0.0309333811 -0.1067880427 -0.2083601782 -0.0193019293 0.1921643066 0.2675310496 -0.1159577245 0.0367206784 0.1055677008 -0.0623785539 0.1888409885 0.0384766285 0.0128290673 0.1455397601 -0.0526972051 -0.0762023367 -0.0618759766 -0.0737764288 -0.0713599617 0.0424618534 0.0070200055 -0.0634446805 -0.0181136389 -0.0387838235 0.0795637453 -0.0051166900 0.0042498988 0.0161194394 0.0423928436 -0.0284622197 0.0019901587 -0.0039443404 0.0361909239 0.0065077289 -0.0026694173 -0.0310335204 -0.0245474588 0.0136710926 -0.0059928932 -0.0192618843 0.0221673546 0.0382336250 -0.0042784601 0.0155106909 0.0484589272 0.0230942352 0.0071129579 0.0275170782 0.0261269441 0.0003921878 -0.0214857472 -0.0545938406 0.0179505249 -0.0201036598 -0.0355754197 0.0342048671 0.0511521313 -0.0172175595 0.0033229063 0.0065115003 0.0549308496 0.0067375722 0.0416731129 0.0483912115 -0.0025283956 -0.0418541950 0.0254158656 -0.0216125366 0.0027394690 -0.0105099788 0.0274988883 0.0088018149 -0.0389577777 0.0385978569 0.0067262458 -0.0300872112 0.0094359493 0.0091995450 0.0039184585 -0.0409710588 0.0025885317 0.0447120363 -0.0350565508 0.0065395282 -0.0038452366 0.0434827454 0.0223873087 -0.0216809657 0.0014087116 -0.0037571923 -0.0428574628 0.0112895920 0.0102812623 0.0043492788 -0.0728515083 -0.0068793935 -0.0769900174 0.0107822540 -0.0170924688 0.0280405252 -0.0205292926 -0.0270176242 0.0259843189 -0.0086740899 0.0031163176 -0.0393392010 -0.0413909132 -0.0233627635 0.0226883817 -0.0011486876 0.0175540672 0.0269748834 -0.0001597172 0.0222107933 0.0218803114 0.0154870207 0.0303457680 0.0232317953 0.0108924524 -0.0153318636 0.0143824134 0.0251713187 0.0534371387 0.0174321537 0.0149913225 -0.0275769217 0.0352644016 0.0046973714 -0.0002914115 0.0257148325 -0.0004761856 -0.0438023350 0.0444733877 0.0042048161 0.0015865231 0.0221515276 -0.0101589101 -0.0851043982 -0.0157348001 0.0164751706 0.0342292114 -0.0075529993 0.0143968032 0.0338108210 -0.0045618006 0.0109434860 0.0342466386 0.0315317442 -0.0057037131 0.0137425751 -0.0065581891 0.0136999752 0.0382927835 0.0568718838 -0.0171509569 -0.0034301763 -0.0022833342 0.0132584887 0.0341146766 0.0299175965 -0.0044707402 0.0164452804 -0.0055999075 0.0147099794 0.0358802532 0.0512559602 -0.0165294253 0.0025261582 0.0469314114 0.0049097964 -0.0710003666 0.1302019098 0.0060804606 -0.0765931610 0.0291343690 -0.0069495742 -0.1524056978 -0.0201347789 0.0058140488 -0.0582081188 0.0651562308 -0.0286609235 0.1126420108 -0.0459101593 -0.0814200944 0.1685449131 0.1455650282 -0.0580396174 0.1643905603 0.0773632913 -0.0088045424 0.0816485526 -0.0050162021 -0.0333153627 -0.0462815827 -0.0018005601 -0.0314446408 -0.0320259782 0.0003379876 -0.0257618812 -0.0168735720 0.0104209144 -0.0018195617 0.0153074117 0.0018045830 -0.0221274861 -0.0143460122 -0.0007081170 0.0058218757 -0.0041665823 0.0055638914 -0.0012340193 0.0055803229 0.0067033252 0.0064660768 0.0000938181 0.0017821672 0.0058008634 -0.0001490950 0.0050497213 0.0056793342 -0.0015383649 0.0016963750 0.0048534727 -0.0109045873 0.0033195641 -0.0241277531 -0.0011554904 -0.0123161003 -0.0031005834 -0.0201833259 -0.0195548121 -0.0291554047 -0.0462177904 -0.0153569893 0.0515158377 -0.0043379593 0.0270130547 -0.0061264744 -0.0333597207 -0.0062995885 0.0146487609 0.0313793112 -0.0146399500 0.0159486296 0.0223807901 -0.0311335007 0.0018857452 -0.0214450680 -0.0306346906 0.0280115445 -0.0138104094 0.0052268827 -0.0079572807 0.0507257680 -0.0216714324 -0.0025452088 0.0192353041 -0.0261544091 0.0122908810 0.0039243501 -0.0354546903 0.0278768274 -0.0227386945 0.0381538762 -0.0244552306 0.0834399049 -0.0084121594 -0.0049017729 0.0413445371 0.0052098609 0.0088434202 -0.0297665368 0.0225259639 0.0213811169 -0.0263417227 -0.0059326066 0.0451462650 -0.0268823341 0.0805303554 0.0251325397 -0.0183064169 -0.0034019345 -0.0490718730 -0.0132296378 0.0864207309 -0.0364825056 -0.0266014583 0.0596641294 0.0390829224 -0.0052978002 0.0056545287 0.0099425472 0.0049640503 0.0358911088 -0.0715716745 -0.0237210731 0.1325241880 -0.0646018874 -0.0447599184 0.0574438882 0.0716251058 -0.0063000206 -0.0350183211 0.0359133414 0.0212193431 0.0327039214 -0.1115350142 -0.0335019677 -0.0441438167 -0.0685988231 -0.0154400467 -0.0268665564 0.0069676077 0.0912518624 -0.0282802375 0.0215371888 0.0567288344 0.0011978204 0.0009155975 0.0007038758 -0.0495449065 0.0042984632 -0.0179319636 -0.0118064875 -0.0023917087 -0.0141134914 0.0181234587 -0.0403964457 -0.0095970564 0.0205787973 -0.0274590188 -0.0472790489 0.0744616112 0.0661679081 0.1565254116 -0.0442062737 0.0711701996 -0.0143151611 0.0156161793 -0.0543170371 -0.0286219383 -0.0112309595 -0.0036932943 -0.0127690241 -0.0674415490 -0.0204235296 0.0011547448 0.3184088518 0.0554774987 0.2091367965 -0.0500040876 0.1627734282 0.4119374595 -0.0829066103 0.0449485084 0.0674805571 -0.0013687990 0.1154904098 0.1472575823 -0.0362422959 0.0274403214 -0.0537924024 -0.1473130697 0.1891878627 -0.0846321363 0.0371573377 -0.0263888488 0.0031352937 0.0287182322 -0.0847581463 0.0068336191 -0.0027882113 -0.0955396858 -0.0505199165 -0.1135056034 -0.0021552662 0.0125985566 -0.0689169385 -0.0765350015 0.0037575512 -0.0671859043 0.0069134014 0.0007070827 -0.0025642156 -0.0177333782 -0.0353183459 -0.0386975212 0.0047603179 -0.0067731432 -0.0228743552 0.0336968591 0.0414067385 0.0054114577 0.0295254641 0.0530155001 0.0379332047 0.0127679278 0.0308893194 0.0337191497 -0.0097979512 -0.0259555544 -0.0805537449 0.0049196884 -0.0204323441 -0.0471631490 0.0559917349 0.0588247586 -0.0106866121 0.0041415665 0.0076485644 0.0808623303 0.0145045211 0.0474969672 0.0652583686 -0.0223390048 -0.0516681589 0.0002176515 -0.0041650979 -0.0014603126 -0.0013362680 -0.0023640843 -0.0028927584 -0.0029895906 -0.0033481891 -0.0026214132 -0.0010887860 -0.0015794374 -0.0006056783 -0.0018354678 0.0008792586 0.0001458816 -0.0012087291 -0.0077372238 0.0000216799 -0.0022619541 0.0009800502 -0.0028624501 -0.0053685626 -0.0026387169 -0.0022793401 0.0014297056 -0.0009575946 -0.0012021074 -0.0034784012 0.0023604962 -0.0013026345 -0.0871647942 0.0065476936 -0.0177870511 0.0462577734 -0.0349674477 -0.0302867912 -0.0088137947 -0.0018134764 -0.0031424149 -0.0050793996 -0.0011108048 -0.0020622027 0.0124233044 0.0009795491 0.0364659349 0.0196579891 0.0047782683 0.0426687245 0.0098631304 0.0087124122 0.0358753739 0.0063299035 -0.0046285619 -0.0211479536 0.0046595079 0.0140686113 0.0486119668 -0.0022434633 -0.0104302883 -0.0543141356 0.0240989074 0.0056538636 0.0265106759 0.0115773129 -0.0094994594 -0.0325884001 0.0325556604 0.0068346020 0.0307298862 0.0062921710 -0.0220940973 -0.0787045580 0.0116630562 -0.0003682892 0.0043364742 0.0112802192 0.0016601204 0.0051555945 0.0116996835 0.0019996693 0.0051286665 0.0096490758 0.0078361509 0.0076123229 0.0105409326 0.0022301062 0.0058579156 0.0065851904 0.0109355685 0.0069953180 0.0105302633 0.0067913284 0.0088577412 0.0077167050 0.0094924739 0.0104703111 0.0103348641 0.0085382472 0.0122515658 0.0033115163 0.0122183243 0.0134856271 -0.0415177735 0.0117983112 0.1111436202 -0.1686711597 0.0088226233 0.1206316307 -0.0166096807 0.0230064937 0.2420048247 0.0754430766 0.0139843649 0.0915380908 -0.0616262600 0.0332815723 -0.0844361537 -0.0037355234 0.0415422915 -0.1191298770 -0.0962203986 0.0621915681 -0.0886373631 -0.0631980253 0.0370237746 -0.0881207013 -0.0178248376 -0.0498337848 -0.1122767179 -0.0150815409 -0.0389294334 -0.0765143724 -0.0091737310 -0.0222436508 -0.0325739191 -0.0027460117 0.0117554869 0.0288724374 -0.0077043720 -0.0182806119 -0.0263645709 -0.0064084907 -0.0045985984 -0.0130543703 0.0007084112 -0.0112781355 -0.0253637732 -0.0263368868 -0.0047914389 -0.0101047682 -0.0322648343 0.0193152314 0.0021191123 -0.0505939908 0.0082584959 0.0011666734 -0.0228460981 -0.0152480086 0.0025544460 0.0038699326 -0.0195658064 0.0258626437 -0.0058805232 -0.0103401128 0.0403867613 -0.0113432694 -0.0125163333 0.0314700704 0.0417221741 -0.0050534858 0.0345318236 -0.0684200883 0.0477587099 -0.0151048191 -0.0364897875 -0.0265994088 -0.0753769082 -0.0012617762 -0.0246338884 -0.0475628772 0.0467652122 0.0218775903 -0.0071105668 0.0229274732 -0.0394287894 -0.0330310149 0.0152966607 0.0000917723 -0.0069158603 0.0542190392 0.0163836768 0.0018278580 0.0656102265 -0.0174997247 -0.0090522370 0.0136536074 -0.0492125223 -0.0563850089 -0.0100503253 0.0106234920 0.0116771604 0.0554653027 0.0265026166 0.0081354725 -0.0353967132 0.0240513120 -0.0271837301 -0.0422705017 -0.0150275938 -0.0134085441 -0.0039754281 -0.0473202444 -0.0094572530 -0.0803114817 -0.0430839070 0.0621903282 -0.0098625023 0.0600564341 -0.0412037131 -0.0755266211 0.0268033396 0.0997857181 -0.0378992239 -0.0691470664 0.0764329777 0.0066483805 -0.0235192386 0.0018635237 -0.0315487845 0.0788645831 0.0431732259 -0.1203776392 0.0571566997 0.1476979222 -0.0223183732 -0.1191146003 0.1070019581 0.0511408309 -0.0546788900 -0.0353558956 -0.0305658869 0.1324079869 0.0482394324 0.0065976442 0.0964965819 -0.1228615495 0.1239699343 -0.0452452853 -0.0466342285 0.1332145859 -0.0745427767 -0.0394495241 -0.0400450444 0.0475644196 0.0001963428 0.0190561525 0.0007377704 0.0097890413 0.0085846539 0.0073977476 0.0002953756 -0.0032750929 0.0258187912 -0.0081985870 0.0031189355 0.0039327417 0.0171535170 -0.0087516748 -0.0246812514 -0.0522185545 -0.0010195644 -0.0228950926 0.0050731749 -0.0078879757 0.0179290203 0.0062895815 0.0049609302 0.0053822510 -0.0023274292 0.0008167473 0.0029952802 0.0013897623 -0.0617572324 0.0054114502 -0.0825823872 0.0175950096 -0.0557453971 -0.0923410361 0.0232997719 -0.0468887138 -0.0539027121 -0.1307355489 -0.1201187064 -0.0776065712 -0.0392728740 0.1333698709 0.0550587610 0.1483167548 -0.1004531328 0.0288426036 -0.0238402776 -0.0021263252 -0.0139422664 -0.0186066589 0.0402055096 -0.0008449750 -0.0045150236 0.0348292152 0.0144221610 -0.0016829694 0.0072152181 0.0062713238 0.0007509465 -0.0023079145 0.0018673665 0.0003054936 0.0024132024 0.0020160601 -0.0056414949 -0.0238945068 -0.1053835780 -0.0839491712 0.0184982067 -0.0389558315 -0.0479180224 0.0797606433 0.0848060877 0.0241456143 0.0553635753 0.1280161650 0.0918158165 0.0141800172 0.0837378736 0.0860302415 -0.0192621241 -0.0696646587 -0.1740491331 0.0239485536 -0.0750600628 -0.1095731468 0.1372401309 0.1288738438 -0.0046379723 0.0059275404 0.0196736724 0.1824938898 0.0039998537 0.1325343713 0.1668086099 -0.0574112132 -0.1334432037 -0.0322792996 0.0324126460 -0.0000132552 0.0073723543 -0.0229756868 -0.0045150055 0.0405831559 -0.0376229247 -0.0017362315 0.0295871172 -0.0086201098 -0.0054532603 -0.0075561078 0.0446927342 0.0000041864 -0.0510137325 0.0485772747 -0.0046925422 0.0016525917 -0.0441935482 -0.0186234949 0.0273144123 -0.0013784492 0.0049864973 0.0421005325 -0.0141002034 -0.0051328928 -0.0058553993 0.0755093204 0.0117840280 -0.1779720920 0.0150422361 -0.0409270826 0.1301962299 -0.0762401206 -0.0742712840 -0.0151099686 0.0092031752 -0.0017817250 0.0433782350 0.0403097574 0.0223653991 0.0106758799 0.0344800804 0.1036707601 0.0121855330 0.0434913288 0.1163641580 0.0076768056 0.0202377911 0.0760210382 -0.0174582620 -0.0367345260 -0.0608064505 0.0116758872 0.0215259275 0.0796744180 -0.0348606678 -0.0814211331 -0.1701837250 0.0064462963 0.0328070382 0.1030931825 -0.0184300443 -0.0295095416 -0.0435876630 0.0119407533 0.0401171139 0.1195847699 -0.0392742329 -0.0700588227 -0.1385759506 0.0164133633 -0.0364465506 -0.0500802626 0.0092102261 -0.0271735126 -0.0416020411 0.0040583077 -0.0208853396 -0.0675021842 -0.0250408233 0.0153649604 -0.0502004591 -0.0052687913 -0.0260495824 -0.0759707688 -0.0480685052 0.0332385008 -0.0471679056 -0.0056132927 0.0014249604 -0.0307762488 -0.0368871475 0.0293081574 -0.0298522193 -0.0095116546 0.0141163490 -0.0083673809 -0.0675731844 0.0600427263 -0.0067878647 0.0030089096 0.0137306562 -0.0375844500 0.0105168335 0.0416215881 -0.0597541828 0.0081735205 0.0257978115 -0.0438895352 -0.0283762295 -0.0190208544 -0.0556645763 0.0189176560 -0.0086908307 0.0203932012 0.0139408117 -0.0013049381 0.0263101854 0.0204690705 -0.0188767775 0.0102398414 0.0168286640 -0.0162748870 0.0310236839 -0.0006447989 -0.0027636423 -0.0120705934 -0.0005076552 -0.0008529754 -0.0081469987 0.0004480261 0.0000488205 -0.0056252819 0.0007176367 0.0038769806 0.0014060837 0.0006649177 -0.0006488542 -0.0063323750 -0.0026000488 0.0040205766 0.0003356076 -0.0019961394 0.0043666970 0.0000628319 0.0027390192 0.0006683940 -0.0050337080 0.0004835450 0.0018404779 -0.0029236560 0.0058685703 -0.0010495775 -0.0066867958 -0.0061947044 0.0013570705 0.0025397073 0.0025348219 -0.0029978477 0.0021363081 -0.0084771597 -0.0037313799 0.0037453658 -0.0074330647 -0.0043741041 0.0023105035 0.0030656061 0.0047466424 0.0049095744 -0.0300279255 0.0197462804 -0.0250068750 -0.0189742403 0.0001107230 -0.0164108991 -0.0075111917 0.0001507681 -0.0065856983 0.0164788484 0.0043334015 0.0092384921 0.0090631637 -0.0078418483 0.0065127595 -0.0095473045 0.0094257834 -0.0073708030 0.0075896404 0.0096248324 0.0056077033 0.0166779593 -0.0015059785 0.0056110537 0.0096507207 -0.0148294727 0.0043486444 -0.0229112420 0.0158716727 -0.0159468142 0.0065878529 0.0167582896 0.0068989027 0.0006631243 0.0030716908 -0.0005579536 -0.0006832403 -0.0072929073 0.0061387263 -0.0023433547 -0.0057003638 -0.0037424635 -0.0186575064 0.0044215405 -0.0279405339 0.0067189920 0.0040041398 0.0265551462 -0.0194894820 0.0110317912 -0.0280205414 -0.0197772964 0.0066347328 -0.0343801042 -0.0117939148 0.0052468282 -0.0163054413 -0.0013373559 0.0072823459 0.0111711024 -0.0254552303 0.0136333735 -0.0339117833 -0.0158884740 0.0127232471 -0.0279302528 -0.0097951254 0.0039610486 -0.0168353432 0.0082822063 0.0052825856 0.0345470865 0.0261867965 -0.0001767744 0.0666110487 0.0147580121 0.0006715180 -0.0137117908 0.0148956368 0.0014882565 -0.0084468293 0.0003163393 0.0012066992 -0.0021627634 -0.0151300109 -0.0030005711 -0.0188809814 -0.0083086277 -0.0179097669 0.0107596291 0.0079873306 -0.0498002265 0.0638001158 -0.0214602857 0.0384002115 -0.0156048496 -0.0383510821 0.0306465770 -0.0229238991 0.0754700237 -0.0132285013 -0.0278992817 0.0091794636 -0.0066194469 0.0285279437 -0.0064326295 -0.0079400049 0.0050247524 0.0296905036 0.0082790288 -0.0136276466 -0.0363005979 0.0374905154 -0.0270686533 -0.0345560122 0.0056288029 -0.0021293837 -0.0628296589 0.0245763893 -0.0389174499 0.5143769832 0.2981170107 0.0621116786 0.2103686314 -0.5483867446 -0.1733701681 -0.3680188861 0.1218073256 -0.0208213134 0.0338417371 0.0331142751 0.0930627695 0.0280591634 -0.0475172251 0.0485711092 0.0099148722 -0.0673718826 0.0017353629 0.0230428901 -0.0097932343 -0.0384483084 0.0421576138 0.0310380872 0.0136967771 0.0542754854 0.0146776160 -0.0371266391 -0.0013607411 -0.0023707806 -0.0061272747 -0.0116133841 -0.0049535011 0.0055882766 -0.0071679270 0.0025114369 0.0140012214 0.0026551911 0.0088204626 0.0105019540 0.0087487424 0.0036389895 0.0077860266 0.0067236557 -0.0023118771 -0.0028664697 -0.0217652675 -0.0095052311 0.0074215005 -0.0141281476 0.0025848176 0.0219408339 -0.0011907987 0.0016643637 0.0009878839 0.0187663847 0.0064510379 0.0092744431 0.0141093453 -0.0041911172 -0.0093677375 0.0017322967 0.0015221862 -0.0002607128 0.0017417778 -0.0011385438 0.0030912550 -0.0000777951 -0.0023805000 0.0034692015 -0.0017835490 -0.0017824285 0.0018371407 -0.0015632151 -0.0003517150 -0.0013761847 0.0027347422 0.0039900403 -0.0012197559 0.0032537562 -0.0008816794 0.0050762060 -0.0001145461 -0.0008155785 0.0001712432 -0.0040977109 -0.0018718492 0.0021493184 -0.0033330763 -0.0003959629 -0.0033769275 -0.0183012209 0.0007042236 -0.0030506611 0.0107151442 -0.0111103943 -0.0044530878 0.0027325548 0.0010177939 -0.0006395348 -0.0022882185 -0.0009729988 -0.0027886338 0.0030811602 0.0053060229 0.0067156467 0.0023072941 0.0061998473 0.0085529961 0.0047578552 0.0026932021 0.0069522786 0.0015701947 -0.0042086458 -0.0042803889 0.0076289081 0.0031886654 0.0084014811 0.0009786234 -0.0088448125 -0.0120597180 0.0004894863 0.0033545528 0.0075831207 -0.0006138203 -0.0043080618 -0.0049317550 -0.0013988678 0.0040057578 0.0088726259 -0.0035470312 -0.0095743417 -0.0138405789 -0.0006809956 0.0035709831 -0.0010234723 -0.0005312246 0.0026616810 -0.0031798657 0.0016901144 0.0014082824 -0.0005460745 0.0023430148 -0.0014484410 -0.0015665893 0.0035635671 0.0017996076 0.0010720382 0.0051860508 -0.0037715423 -0.0018168090 -0.0039010147 0.0018837380 -0.0019625404 -0.0024159116 -0.0003113314 -0.0010304329 -0.0071000725 0.0024402836 -0.0021653376 -0.0044630645 -0.0013015393 -0.0001855461 0.0170434085 -0.0368183001 0.0218021362 0.0453935689 -0.0781696804 0.0523386216 -0.0038273195 -0.0717270367 0.0011663041 0.0478283143 0.0125397351 0.0520575582 -0.0078835094 -0.0108183023 0.0082178044 -0.0302750737 -0.0115537579 0.0235492089 0.0076174277 -0.0170367504 0.0178292265 -0.0010786328 -0.0115326913 0.0079080300 0.0085548961 0.0161170104 -0.0025446187 0.0190413082 0.0139912285 0.0143280382 0.0129784378 0.0113273191 0.0067208575 -0.0064249172 -0.0012538482 -0.0091760191 -0.0043426188 0.0083345501 -0.0087896878 -0.0154951349 -0.0075573049 0.0113035182 -0.0100694688 -0.0056278802 -0.0028081565 -0.0028417205 -0.0130455157 0.0126346707 -0.0101343590 -0.0074195938 0.0192747938 -0.0002732191 -0.0131276951 0.0135216710 -0.0123317545 -0.0122536015 0.0097261905 -0.0090081479 0.0106171009 -0.0063691063 -0.0057027636 -0.0029254679 0.0007171929 0.0080509337 -0.0466057040 -0.0122252948 0.0102353852 0.0245523014 0.0075330273 -0.0709409046 0.0418183576 -0.0909768276 -0.0239755097 0.0036989316 -0.0254361313 -0.0116140705 0.0020812668 -0.0124190096 0.0040284200 0.0070163791 -0.0065275614 0.0031223576 -0.0043511214 -0.0017578520 -0.0051928531 0.0044850926 -0.0004450930 0.0049544714 0.0068410695 0.0048388753 0.0136149752 -0.0018517551 0.0045013890 0.0032671640 -0.0106212999 -0.0044828451 -0.0111530759 0.0070848280 -0.0002922878 0.0019837736 0.0146320799 0.0028781872 -0.0281685842 0.0190116630 -0.0459143557 0.0097077007 -0.0055859162 0.0066583238 0.0053947057 -0.0030569936 0.0126143932 0.0015778013 0.0024462526 -0.0086537945 0.0025974462 0.0004683465 0.0044130487 0.0021682540 0.0019681057 -0.0087389420 0.0001395528 0.0038483384 -0.0063739588 -0.0014083059 0.0027282364 -0.0036876409 0.0040247118 -0.0005521176 0.0014822113 0.0018517644 0.0016035704 -0.0113378250 0.0074814564 0.0069265209 0.0114568679 -0.0015081283 0.0032632619 -0.0008199253 0.0059469472 -0.0035729252 0.0062068717 0.0047111606 -0.0015497532 0.0133493570 0.0174275321 -0.0047059199 0.0091874107 0.0169462965 0.0013484392 0.0050048245 -0.0037253157 -0.0105043813 0.0181996502 -0.0020534553 0.0202434160 -0.0340871362 -0.0112066030 0.0250641622 -0.0343848388 -0.0432551970 0.0706253301 -0.1209826419 0.0002355530 -0.0659147767 0.0657846742 0.0895316159 -0.0262895177 -0.0045812285 -0.1203016131 -0.0151614093 0.0733995366 -0.0044222602 0.0428558805 -0.0369276833 0.0256232932 -0.0239326324 0.0365900769 0.0066280013 -0.0030783586 0.0039611675 0.1422703869 0.0634538785 -0.0584144345 0.0457690863 0.0728573895 0.0040685689 0.1912007273 -0.1392610937 -0.0416775810 0.0840634660 0.1503855034 0.3188478511 -0.0765487861 -0.2880221391 -0.2120467064 -0.5459796009 0.1187021128 0.0760216438 0.0260907134 0.0316018775 -0.1946013047 0.0064686753 0.0308581735 -0.1001816308 -0.0401973999 0.2217396511 0.0341263060 0.0730831204 -0.0240436457 -0.0051705275 -0.0193710445 0.0310537624 -0.0632873650 -0.0455336412 -0.0074298549 0.0525117447 0.0162181702 0.0292896364 -0.0144510220 0.0187551436 0.0218403215 -0.0142054974 0.0022678918 -0.0135721016 0.0030254900 -0.0100941861 -0.0271970315 0.0122143271 -0.0076673005 -0.0061446275 -0.0002213257 0.0059205635 0.0261774735 -0.0144279360 0.0302724111 0.0307927330 -0.0201344608 0.0058247841 -0.0258305540 0.0048371699 -0.0044414444 -0.0049471756 0.0037528601 -0.0146264006 -0.0072958221 -0.0019069208 0.0052742655 0.0425903268 -0.0204147085 -0.0120619098 -0.0108963797 0.0066678175 -0.0083211983 0.0019538411 -0.0173454941 0.0034266257 0.0180938509 -0.0223890255 0.0138260196 0.0142830864 -0.0117398577 0.0147135753 -0.0030008570 0.0144967684 -0.0212046498 -0.0224996561 0.0114119810 -0.0157748002 -0.0084527633 -0.0301491027 0.0048385513 0.0069045059 -0.0023188523 0.0247545715 0.0220460438 -0.0158220629 0.0297089531 -0.0034652290 0.0311148399 0.0061097049 0.0119458257 -0.0039811211 -0.0070844872 0.0151123277 -0.0019606617 -0.0099136830 -0.0116451784 0.0081697741 0.0193699781 0.0061113624 0.0189278008 0.0077005267 0.0032140929 -0.0014138720 -0.0005690132 0.0003847507 -0.0063726330 0.0060354059 0.0033559943 -0.0085555763 0.0077383114 0.0066907059 -0.0079910831 0.0015793531 0.0019867360 -0.0123631071 0.0072786478 0.0049274973 -0.0116153399 0.0045294957 0.0077617796 -0.0020415290 0.0060016894 0.0111142901 0.0025348036 0.0095944822 0.0084524158 0.0006202163 0.0065615525 0.0127957706 0.0118508477 -0.0022523156 -0.0149163341 -0.0074397527 0.0033144327 -0.0138818346 -0.0003021490 -0.0027707798 -0.0140011030 -0.0121551918 -0.0107851981 -0.0028365943 -0.0057964915 -0.0030244932 -0.0163540598 -0.0166474890 -0.0179516111 0.0041762007 -0.0071028675 0.0042526796 -0.0083761511 0.0001489550 -0.0075742022 0.0011660720 0.0019088452 0.0075647225 -0.0077350872 0.0026582014 -0.0129498980 0.0112521976 0.0070144140 0.0132708037 0.0113891690 0.0011105824 -0.0089890760 0.0121980709 0.0017161286 0.0131392040 0.0011194581 0.0352336341 0.0541234637 0.0121032030 -0.0059804974 0.0220946684 -0.0323139053 0.0832683698 -0.0568530808 0.0017234309 0.1528460626 0.0814125396 -0.0868004321 0.0787227156 0.0414434383 -0.0673394771 0.1252118330 0.0413296854 0.0664673907 -0.0121207829 0.0777453980 0.0806429519 0.0896034663 0.0608434973 0.0590892339 0.0329142716 -0.0218398080 0.0078397413 -0.0572092337 -0.0233542852 0.0252751721 -0.0622780190 -0.0599371837 -0.0022803012 0.0466826223 -0.0367387372 0.0104352064 -0.0055149485 0.0134809551 -0.0224138000 0.0320154484 -0.0233155650 -0.0171591265 0.0604896005 0.0471349463 -0.0313487754 0.0303843908 -0.0611077953 -0.0312875651 0.0371651905 -0.0423061505 0.0317929521 -0.0408550145 -0.0525553395 -0.0294003595 0.0157409951 -0.0267279735 -0.2350705416 -0.0916990864 -0.0374308777 0.1346244055 0.0628380715 -0.0068819104 0.0249106348 0.0260757807 -0.0622600868 -0.0133233972 -0.0814868877 -0.0158951987 -0.0148558656 -0.0392260537 0.0660505676 0.0076965963 0.0294209858 0.0343100625 -0.0422720491 0.0026223160 -0.0102412407 0.0132863839 -0.0159497050 0.0517172562 0.0153074236 0.0277732784 0.0697337162 -0.0187962990 0.0158111881 0.0279550322 -0.0587121398 -0.0177745631 -0.0531385178 0.0333208105 -0.0305978177 0.0581640979 0.0273046052 0.0436419500 0.0134050675 0.0100584689 0.0184120970 -0.0370220640 -0.0016958806 -0.0347460507 0.0053923569 -0.0363593315 -0.0347879193 -0.0600582936 -0.0378719213 0.0413933372 -0.0067639430 0.0351529935 -0.0453410776 -0.0505671932 0.0077277253 0.0841480064 -0.0222014987 -0.0608050722 0.0589688002 0.0096455263 -0.0266048154 -0.0038445856 -0.0173608710 0.0475966260 0.0372889562 -0.0784610697 0.0281988597 0.1280079997 -0.0103681580 -0.1004327188 0.0822052018 0.0400362023 -0.0480366490 -0.0312442427 -0.0131373890 0.0894611721 0.0493333714 0.0003031614 0.0644562380 -0.1201137439 0.0764416508 -0.0249781615 -0.0474987524 0.0903417937 -0.0083741195 -0.0304706503 0.0082670328 -0.0572582538 0.0641425857 0.0059129424 -0.0116708052 0.0280391805 0.0202872629 -0.0098915397 0.0122493022 0.0425865984 -0.0352036578 0.0548753053 0.0197479382 0.0267374964 -0.0498927279 -0.0344675193 0.0212617104 0.0787557737 0.0222580050 0.0541849774 -0.0415684497 -0.0064872954 -0.0365730711 0.0068070000 -0.0068084816 0.0165767243 -0.0341960009 -0.0368226983 -0.0109402026 -0.0012274586 -0.0232889573 -0.0933345066 0.1594261116 -0.0293012227 -0.0229449494 0.1175917087 -0.1496781775 0.1351299637 0.1102205175 -0.0096259568 0.0327080117 -0.0225971123 0.0127746999 0.1061530414 0.0018900004 0.0671480719 0.0859469681 -0.0809177286 -0.0289793959 -0.0400256737 0.0772915793 -0.0215180204 -0.0170188286 0.0800962472 -0.0150571105 -0.1473983440 -0.0439339878 -0.0967859844 0.0188324601 0.0209185672 -0.0266901896 -0.0677951871 0.0300907292 -0.0155154103 0.0031669044 -0.0208891926 0.0635463193 0.1053519142 -0.0365480559 0.0788819020 0.0617594091 -0.0359088934 0.0093994159 -0.0881459675 0.0150097593 -0.0446663030 -0.1259369355 0.0354022416 -0.0532291181 -0.0574704231 0.0102030033 0.0014933751 0.0723056621 -0.0220001870 0.1380734299 0.0974004620 -0.0540522507 0.0303302360 -0.1496735663 0.0197900481 -0.0171353116 -0.0237889277 0.0134698781 -0.1011060029 -0.0767285684 0.0096884631 -0.0182281879 0.1279886441 -0.0249421617 -0.0189520921 -0.0653109167 0.0270466032 -0.0315334184 0.0151922626 -0.0566575334 -0.0114107595 0.0812317097 -0.0759413970 0.0322710052 0.0527143170 -0.0356627967 0.0527478289 -0.0307241142 0.0515674603 -0.0419533814 -0.1182404092 0.0477473205 -0.0597740935 0.0006325828 -0.0966763283 -0.0006511308 0.0211992393 -0.0098369775 0.0668153274 0.0801758774 -0.0495978598 0.1007866619 -0.0448112929 0.1006332743 0.0497833555 0.0370901140 -0.0067703995 -0.0481647909 0.0701374446 0.0022429959 -0.0293958286 -0.0476215408 0.0286412415 0.0417927366 -0.0070667425 0.0548455469 0.0463740527 0.0261648884 -0.0237258955 0.0031826867 0.0135142446 -0.0470381042 0.0518184222 0.0136591551 -0.0446486464 0.0535035714 0.0174985486 -0.0273591389 0.0501929587 0.0078982379 -0.0595665055 0.0583770923 0.0044445725 -0.0299547925 0.0166635644 0.0326994626 -0.0208688679 0.0329599700 0.0354788195 0.0143752266 0.0223432049 0.0357858198 -0.0106611948 0.0298031001 0.0353201700 0.0642621009 -0.0049134117 -0.0070340832 -0.0114305617 0.0136755601 -0.0112394491 -0.0007702945 0.0096833708 -0.0278680112 -0.0015292920 -0.0173122173 -0.0267161029 0.0165618789 0.0312871982 -0.0285711084 0.0033478280 -0.0271921707 -0.0215648023 0.0224304110 0.0067987147 -0.0251348492 -0.0015559431 -0.0199597662 -0.0202974958 0.0254679083 0.0020369250 -0.0326942037 -0.0178837896 -0.0397814235 -0.0116279630 0.0377962014 -0.0291724145 0.0256384234 0.0091092005 -0.0788043273 0.0601346032 -0.0149437816 -0.0032556455 0.0660228637 0.0461114008 -0.0449024852 -0.0179868356 -0.0196748313 -0.0201806730 0.0392227065 -0.0909420328 0.0648133629 0.0190228927 -0.1582625939 -0.0808808062 0.0881988177 -0.0951755926 -0.0354134988 0.0641809745 -0.1189824643 -0.0024822907 -0.0419272217 0.0244348013 -0.0062858499 -0.0300917246 0.0508246493 0.0091526051 -0.0415760709 0.0247686360 0.0395245103 0.0024849517 -0.0228613910 -0.0000362581 -0.0490491144 -0.0067139569 0.0327947380 0.0619867274 -0.0211557637 0.0424700629 0.0509640063 0.0050197566 0.0268931464 0.0792701250 -0.0543007574 0.0430680437 0.0437043160 -0.0718225098 0.0527648702 0.0667760998 -0.0648630973 -0.0184806286 0.0512805367 0.0051382396 -0.0021207533 -0.0645614894 0.0314223735 -0.0809181048 -0.0336493342 0.0200989877 -0.1456362581 -0.0209423016 -0.0511498471 -0.0608644506 -0.0642619489 0.0050887116 -0.0054072932 0.0254751095 0.0203856352 -0.0650886488 0.0067212458 -0.0939215458 -0.0168317189 -0.0019762342 -0.0402732616 0.0699371956 0.0000698566 0.0509007886 0.0440692063 -0.0369419608 0.0287330930 -0.0204860639 0.0239996901 -0.0346792743 0.0504165169 0.0111301710 0.0365059228 0.0654963592 -0.0173011221 0.0327144110 0.0437367063 -0.0509917879 0.0220099814 -0.0701114626 0.0486353562 -0.0739405374 0.0562978439 0.0180650403 0.0491746922 0.0236836582 0.0066858807 0.0326696195 -0.0297222200 0.0011915287 -0.0301300040 0.0144029328 -0.0350045139 -0.0259329565 -0.0516566415 -0.0353871616 0.0354992718 -0.0017098137 0.0264486322 -0.0458023576 -0.0422689422 0.0024965728 0.0752495327 -0.0145771158 -0.0586740710 0.0527297840 0.0134911910 -0.0284934384 -0.0065316280 -0.0114868681 0.0381037755 0.0331093207 -0.0665568911 0.0204031174 0.1141241166 0.0000562871 -0.0958783357 0.0842683190 0.0430183974 -0.0494191656 -0.0300124634 -0.0070150057 0.0770699330 0.0456350962 0.0040667231 0.0532213709 -0.1148801774 0.0533136703 -0.0143802962 -0.0499896451 0.0646017518 -0.0232004535 -0.0351395490 0.0366930728 0.0279581884 -0.0810286130 0.0219469923 -0.0057514487 0.0238288679 0.0243109060 0.0099794805 -0.0154425004 0.0102000942 0.0390970295 -0.0453983041 0.0231601998 -0.0196612557 0.0251913504 0.0369224712 -0.0190692771 0.0218149168 -0.0782671108 -0.0180990044 0.0050895076 -0.0147806199 0.0128799354 -0.0037146269 0.0113977380 0.0065329592 -0.0258967166 -0.0280599067 -0.0188474508 0.0003463383 0.0441820628 0.0015512482 0.0081406442 0.0284493490 -0.0167484723 0.0449268870 0.0327830341 -0.0450450488 0.0005617304 0.0097642905 0.0551363577 0.1255075611 -0.0641486109 -0.1447969021 -0.1783497947 -0.3074021426 0.0230842425 0.0328997524 -0.0268118942 -0.0155948201 -0.0706684473 -0.0301252926 0.0412036184 0.0155951359 -0.0480068633 0.0518531769 0.0062593063 -0.0467157235 0.0082302368 0.0299570248 -0.0334922085 -0.0585380704 -0.0077300456 -0.0392262045 -0.0177382275 0.0115922649 -0.0136209390 -0.0389205602 0.0453029628 -0.0131080081 -0.0213165356 0.0346904942 0.0060121100 0.0310634076 -0.0208936318 0.0011435640 0.0554063658 -0.0451250547 -0.0020938168 0.0302855821 -0.0274863367 -0.0208362684 -0.0212429167 0.0263788512 -0.0243413293 -0.0369360840 0.0475945551 0.0176246900 0.0361682649 -0.0364941624 -0.0148679575 0.0182617028 -0.0114974131 0.0046114214 0.0432213596 -0.0374963151 -0.0384196481 -0.0290574174 0.0470862436 0.0659270756 0.0368970651 -0.0386751523 0.0347464861 0.0081907444 0.0617752646 -0.0308861389 -0.0494004338 0.0813512663 -0.0619091369 -0.0568303471 0.0434861265 -0.0447449983 -0.0156845024 -0.0628064466 0.1111408935 0.0763480252 -0.0556538295 0.0734486255 0.0525017156 0.1246053508 -0.0343007806 -0.0250050848 0.0058182212 -0.1121969479 -0.0868028682 0.0599259067 -0.1027264470 -0.0352143542 -0.1339335399 -0.0104943274 -0.0137209226 0.0122625845 -0.0324151085 -0.0060776827 0.0161578149 0.0406698919 0.0335979690 -0.0256608710 -0.0958471027 -0.0406799158 -0.0803073568 0.0382932851 -0.0194212889 -0.0122335905 0.0529486957 -0.0190450030 -0.0218081717 0.0482114443 -0.0112637598 0.0031344504 0.0561500693 -0.0054448539 0.0017543494 0.0521009083 -0.0046979510 0.0190847637 0.0542015584 0.0102587202 0.0150998094 0.0630830799 -0.0196317167 -0.0208846243 0.0659572164 -0.0151395339 -0.0160103378 0.0630759615 -0.0190887047 -0.0166375873 0.0693831811 -0.0106010817 -0.0181893945 0.0140931200 0.1085683388 0.0381969826 -0.0173664248 0.0989831626 0.0003936997 0.0268752408 0.0788712587 0.0977715664 0.0522338851 -0.0104593672 0.0723738038 0.0524133482 0.0996795830 0.1436565476 0.0887640480 -0.0572922520 0.0977592834 -0.0264734557 0.0306877623 -0.0102935097 0.0370767324 -0.0429894639 0.0105692724 -0.0532994303 0.0112030444 -0.0577398250 0.0646782492 -0.1200290194 -0.0214053599 -0.0301077339 0.0531052565 -0.0061866340 -0.1005605065 0.1064552041 -0.0436922300 0.0090358710 0.1155649726 0.0437043833 -0.0602737358 -0.0131651784 -0.0488199591 -0.0059834836 0.0357730723 -0.0926933547 0.1033211550 0.0781708663 -0.1527581216 -0.0870830374 0.0598909993 -0.1501814408 -0.0274539547 0.0185026712 -0.0632607167 0.0082104521 0.0028164414 -0.0018302582 0.0136060888 0.0179820866 0.0465988640 0.0199946887 0.0067669174 0.0198491865 0.0062958922 0.0119144366 -0.0319953803 -0.0135961044 -0.0107223681 -0.0227094038 -0.0001439997 0.0262060079 0.0068551092 0.0080411550 0.0319742369 -0.0082703732 0.0126183322 0.0282412163 -0.0223786992 0.0094193614 0.0163342441 -0.0181193473 0.0365060326 0.0222090812 -0.0234430378 -0.0381253225 -0.0016970090 0.0280315069 -0.0128979724 -0.0245092114 0.0204101880 -0.0477706326 -0.0310658812 0.0333993104 -0.0942718152 -0.0684838089 -0.0481354913 -0.0006686402 -0.0133120826 0.0309913155 -0.0652117305 0.0468249598 -0.1097081829 0.0061310685 -0.0221144458 0.0214845239 0.0008038035 -0.0097223673 0.0001773595 -0.0355157045 0.0358600408 -0.0825485985 -0.0281860254 0.0099763909 -0.0675602355 0.0370078431 -0.0192305413 0.0615090394 -0.0064060893 0.0202616623 -0.0246802160 0.0058438762 0.0057226378 -0.0292969418 -0.0363997921 0.0030689913 -0.0869132946 0.0741775412 -0.0403356412 0.1414599001 -0.0102027231 0.0332760915 -0.0252993292 -0.0698211235 0.0492038953 -0.1262119235 0.0202589550 -0.0079188206 0.0015242842 -0.0145362638 0.0210548884 -0.0206232835 0.0182228411 0.0140951577 -0.0104168199 -0.0053887016 0.0046921087 0.0138043087 0.0172946486 0.0073978602 -0.0194403115 0.0013420991 0.0248650147 -0.0103128938 -0.0084620416 0.0181627305 0.0071534406 0.0039122753 -0.0024833605 -0.0099069121 0.0250139474 0.0017535612 -0.0258126288 -0.0020588059 0.0383657020 -0.0180086608 -0.0154617613 0.0235551556 0.0148302776 0.0011241588 -0.0185148455 -0.0168063280 -0.0107689419 -0.0036911180 0.0303534374 0.0832836111 -0.0396925638 0.0979983084 0.0899170860 -0.0710640847 0.0507086126 0.0105307393 0.0099972395 -0.0270145080 -0.0460432613 0.0391008294 -0.0824233377 -0.0385343820 0.0038925096 -0.0056010341 -0.0177124996 -0.0393579668 0.0268040383 -0.0239491019 0.0056805446 -0.0121055977 -0.0131535195 0.0163550913 -0.0170340882 0.0661734097 0.0086714293 0.0106602641 0.0170684492 -0.0063613080 -0.0043448161 0.0007316476 -0.0227483129 0.0502001995 0.0238568105 0.0211032521 -0.0034310424 0.0240091842 0.0377748488 -0.0240279480 -0.0338528340 0.0315293462 0.0268425628 -0.0225283270 -0.0167318819 -0.0463433146 -0.0979668081 -0.1184414785 -0.1302539643 0.0281601937 0.2326637006 0.2225328058 0.3678966062 -0.0573463694 -0.0170425454 0.0359013554 0.0220487084 0.0374278397 0.0366743346 -0.0397119672 -0.0473295335 0.0525209461 -0.0078648647 0.0026760779 0.0551576991 -0.0234300492 -0.0516961106 0.0210972052 0.0690275128 -0.0168455283 0.0201354876 0.0374315448 -0.0014744509 0.0143116007 0.0187850310 -0.0037841684 0.0174657233 0.0159629801 -0.0065768820 0.0061344817 -0.0054474536 -0.0047047344 -0.0099241694 -0.0159726835 0.0009318330 -0.0127687084 -0.0105684171 0.0017954507 -0.0020931959 0.0121067695 -0.0006360821 0.0271355904 0.0223007375 -0.0106871980 0.0146107042 -0.0158217729 -0.0093469602 -0.0088702744 -0.0024768833 0.0016184148 -0.0234437671 -0.0188382848 0.0057968164 -0.0100508664 0.0204135150 0.0040313116 0.0191292951 0.0132257705 -0.0151855509 0.0111629933 0.0022709631 0.0157687456 -0.0092448551 -0.0144093093 0.0217386272 -0.0188391881 -0.0159698327 0.0100620380 -0.0130650360 -0.0045816423 -0.0214504747 0.0319862048 0.0259202109 -0.0205594040 0.0255232088 0.0114661337 0.0365306515 -0.0112651420 -0.0052347504 0.0002768198 -0.0346924896 -0.0227616234 0.0144008220 -0.0308743369 -0.0106213674 -0.0432256808 0.0041280414 0.0055693041 0.0001325970 -0.0172355347 0.0121250244 0.0031398552 0.0082824921 0.0146558270 -0.0104555051 -0.0294790952 -0.0082631974 -0.0250569387 0.0318835906 0.0128790501 -0.0059708337 0.0195305616 0.0094730469 -0.0184957714 0.0422419065 0.0020209102 -0.0093561424 0.0392589376 -0.0071690474 -0.0124517613 0.0521141541 0.0013513882 -0.0106773334 0.0411618354 -0.0155779011 -0.0182493012 0.0221191048 0.0083872167 -0.0041498452 0.0304103940 -0.0022356780 0.0009573940 0.0167505513 0.0109625765 0.0027991802 0.0258968086 -0.0079799967 0.0134086888 0.0035282704 0.0515169691 0.0017854143 -0.0086566509 0.0446747662 -0.0156490460 0.0138407545 0.0297506296 0.0327387102 0.0135394831 -0.0152639502 0.0267173243 0.0347343856 0.0394195223 0.0574179289 0.0290064132 -0.0386388236 0.0432672377 -0.0219217363 0.0073739484 -0.0204215939 -0.0013484139 -0.0273969778 -0.0002265118 -0.0409761303 -0.0032204184 -0.0481375666 0.0005694667 -0.0613784740 -0.0090236083 0.0604984040 -0.0686419278 0.0303252246 0.1257084015 -0.1565256418 0.0949886899 -0.0012637671 -0.1859518888 0.0161524070 0.1839017650 0.0409136965 0.0876136648 0.0078149515 -0.0495363875 0.1601240953 -0.1861464406 -0.0568084371 0.2944496634 0.1472605397 -0.1264641072 0.2179067114 0.0582008879 -0.0660686590 0.1691063279 -0.0282483644 -0.0074393220 -0.0273707513 -0.0600069420 0.1401094041 0.2067039470 -0.0357193111 0.0941866105 0.0929361775 -0.0041243531 -0.0152824347 -0.1258938694 0.0020709242 -0.0294742593 -0.1079250984 0.0485001595 -0.0251861672 -0.0598127733 0.0725331745 -0.0028877203 -0.0948936620 -0.0581885191 0.1537588473 0.0660597342 -0.0005903285 0.0224971809 0.0176931399 -0.1032012353 0.2269127752 0.1664144912 -0.0084896066 -0.0494644602 -0.0451809834 0.0425493702 -0.0342827814 -0.0184695466 0.0160812257 0.0132185117 0.0009123907 0.0112700314 0.0817818672 0.0396236269 -0.0026074769 0.0978564696 0.0303037559 -0.0160057499 0.0121583220 -0.0277394723 -0.0213317084 0.0048653647 -0.0261448232 -0.0089167789 0.0009073016 -0.0098174725 0.0062320595 -0.0008267282 0.0041734534 0.0067888333 -0.0063806932 0.0077575343 -0.0051310055 0.0021112763 -0.0027962189 0.0083886036 -0.0017931218 0.0137116179 0.0094090560 -0.0037531304 0.0070978250 0.0060181364 -0.0093200607 0.0045859976 -0.0150004186 0.0068529789 -0.0132623823 0.0109901173 -0.0001788986 0.0187812857 -0.0109195920 0.0091463499 -0.0208308529 -0.0030980612 0.0031524886 -0.0104720114 -0.0030628369 0.0026585267 -0.0074584580 0.0010840406 0.0005827781 0.0002666557 -0.0028308232 -0.0001125976 -0.0067721735 0.0036739862 -0.0019592002 0.0059570093 0.0037696605 -0.0005251308 0.0073707348 0.0008310951 -0.0000087456 0.0016931895 0.0016265517 -0.0019685342 0.0024963134 0.0059483139 -0.0030246050 0.0087732637 0.0066463238 -0.0006967639 0.0138646349 0.0027522562 -0.0012028022 0.0013392302 0.0021119144 -0.0027019000 0.0036667176 -0.0077051850 0.0006370847 -0.0158604863 -0.0031809058 0.0008040971 -0.0039861871 -0.0025185279 0.0222376977 0.0134366665 0.0529722483 -0.0839900519 0.0604855810 -0.0020782878 0.0051936900 -0.0104604266 -0.0028790253 0.0015803390 -0.0042819012 -0.0058655017 0.0026338560 -0.0022130627 -0.0041153050 -0.0030018443 0.0072586145 0.0049273692 -0.0028774973 -0.0158522526 -0.0062146892 -0.0094070588 0.0041240485 0.0007227519 0.0045996411 0.0011876259 0.0012874238 -0.0051497224 0.0041581749 0.0057058094 0.0002810844 -0.0032884583 0.0122263339 0.0223338912 -0.0315977582 0.0004343019 0.0026577912 -0.0086358662 0.0160416017 -0.0282247564 -0.0295551477 -0.0181892630 -0.0189714009 -0.0147000794 -0.0092789597 0.0056263080 0.0133909998 0.0171015119 -0.0264788508 0.0123712052 0.0041239227 0.0058336574 -0.0066917372 0.0031178292 0.0013300215 -0.0095602760 0.0029684141 0.0186993397 0.0079102134 0.0104131078 -0.0053244430 -0.0091066822 0.0056872803 0.0075997014 -0.0042372715 0.0056235185 0.0020657523 -0.0033385964 -0.0559047831 -0.0701591341 0.0064143951 -0.0683893551 -0.0608530586 0.0152009716 -0.0224351601 0.0291253000 -0.0057861867 0.0357263495 0.0660295020 -0.0248749278 0.0347249514 0.0197231294 -0.0038062308 -0.0071787579 -0.0670710023 0.0134591932 -0.1024786408 -0.0828176988 0.0306016540 -0.0472316339 0.0684489383 0.0040138081 0.0329668913 0.0110806432 -0.0109638619 0.0618901582 0.0291025390 -0.0026184710 0.0118438873 -0.1175998875 0.0147679873 0.0355360625 -0.1155044631 0.0338875202 -0.0187487022 0.0159656181 -0.0411946367 -0.0607079671 0.1296750210 -0.0723048515 0.0059000777 0.0536128783 -0.0208744981 0.0740203942 -0.0984796176 0.0610020732 0.0302250189 -0.1953662519 0.0631783693 -0.0263134926 0.0051310357 -0.0532803209 -0.0393696800 0.0315453861 -0.0195595679 0.0319519909 0.0829173726 -0.0342723180 0.1242796020 -0.1647014717 0.0961944926 -0.0014351759 -0.0261913729 0.0034446641 0.0513999266 -0.0446507132 -0.0041719986 -0.0110367263 -0.0497661452 0.0274651905 -0.0205307596 -0.0519462014 0.0194327023 -0.0286538796 0.0811405167 0.0166302335 -0.0414337149 0.0533121508 -0.0513401739 -0.0035465041 -0.0145583433 -0.0309073146 -0.0474630505 -0.0893878180 -0.0160703972 0.0668883330 -0.0396576945 -0.0871629059 -0.0374065442 -0.1577740202 -0.0745003472 -0.0915157968 0.0117511182 0.0444249831 -0.0647839531 -0.0443880089 0.0947851389 -0.1579139859 0.0210611362 0.0538971420 -0.0764040682 -0.0536298106 0.1675347314 0.0899576304 0.0770804646 -0.0579118604 0.0207863335 0.1087736642 -0.0332201697 0.0774256762 0.0319229688 0.0685654422 -0.0364456841 -0.0332817506 0.1289543928 0.1490736117 0.0602649146 0.1453374585 -0.1010760323 -0.0360492554 0.2270455113 0.0225934570 -0.0285217473 -0.0717459473 0.0071511180 -0.0920117706 0.0331469861 -0.0025678496 -0.0812172721 -0.1826131487 0.0009227330 -0.1673486423 0.0190377879 0.0042764255 0.0006416621 0.0054133601 -0.0016758437 -0.0061564252 0.0110414980 0.0027740388 -0.0044965232 0.0128017212 0.0183498377 0.0081028182 0.0083316023 0.0014727544 -0.0035676073 0.0074802906 -0.0015934403 0.0187746819 0.0183266948 0.0037360055 -0.0174521961 -0.0080862488 0.0014882612 -0.0205513915 0.0305351812 -0.0008055363 0.0353595222 -0.0015588740 -0.0402257789 0.0427686759 -0.0506487527 -0.0032344365 0.0504059492 -0.0235064033 -0.0042437472 0.0448840386 -0.0234085520 -0.0227180670 0.0264755081 0.0308746547 0.0769468001 -0.0438905688 -0.0257566348 0.0563826458 0.0002892095 -0.0606683420 -0.0531560386 0.0408587238 0.0393412659 0.0225827393 -0.0110378127 -0.0059147926 -0.1027208159 0.0926943630 0.1035484065 -0.0186389371 -0.1030870381 0.0321158888 0.0252040785 -0.0699652230 0.1071279063 0.0145439027 -0.0606717521 0.0533206221 -0.1079423716 0.0137413583 -0.0462364531 0.1280742252 -0.0640185206 0.0364247684 0.1112020411 -0.0968034728 0.1790689918 0.1595715444 -0.0589378950 0.2139817000 0.0632137120 -0.0263780480 0.0857944514 -0.0645526094 0.0000629681 -0.0460453227 -0.0711311065 0.0441151817 -0.0791559157 0.0447253104 -0.0383696141 0.0461726390 -0.0719357915 0.0023469657 -0.0997592134 -0.0811343812 0.0266620048 -0.0703567121 -0.0820189677 0.0723826739 -0.0880423533 0.1088531333 -0.0711172326 0.1166327873 -0.0966206145 -0.0032525718 -0.1441762506 0.0645527578 -0.0700714561 0.1327889299 0.0211615804 -0.0172842894 0.0761432740 0.0174374902 -0.0125673693 0.0738319977 0.0018965635 0.0017795877 0.0042772862 0.0127743981 -0.0015327788 0.0492401152 -0.0187530161 0.0119183820 -0.0404995309 -0.0221104875 0.0128765755 -0.0437699377 -0.0095653142 0.0057727498 -0.0043962794 -0.0143949649 0.0078202361 -0.0210446987 -0.0308413397 0.0166555466 -0.0648470894 -0.0408267160 0.0238045556 -0.0847578208 -0.0134379928 0.0081693399 -0.0053155113 -0.0210194014 0.0070764879 -0.0371608937 0.0389133255 -0.0101543907 0.1118120584 -0.0066938545 -0.0030130797 0.0223760659 -0.0103858322 -0.0491340264 0.0427529758 0.0041671838 0.0215442235 -0.0288588536 0.0309400402 -0.0470097937 0.0927865833 0.0185851455 -0.0035826038 0.0300188768 0.0084105656 0.0300302712 -0.0305403817 0.0261228055 0.0038918064 0.0004483039 0.0171170174 -0.0047423762 0.0138682120 -0.0227781474 0.0040833751 -0.0097222330 -0.0056441458 0.0036784827 0.0028417902 -0.0097757787 0.0365745162 -0.0220267190 -0.0239145812 0.0047592508 0.0260330232 0.0154824201 -0.0059923823 0.0140011092 0.0173604976 -0.0180723678 0.0299688813 -0.0047641547 -0.0029092601 0.0051353810 0.0652347426 0.0723216533 0.0756498429 -0.0018235488 -0.1205495956 -0.1326550540 -0.1903767868 0.0422055469 0.0043352079 -0.0207245844 -0.0156412595 -0.0168819968 -0.0197005763 0.0277928097 0.0333817916 -0.0258682942 -0.0041349821 -0.0050220146 -0.0365113918 0.0384424245 0.0653001900 -0.0249097519 -0.0273833543 0.0279209241 -0.0265709746 -0.0196043350 0.0297168933 0.0350243177 0.0794396828 -0.0527042857 0.0464728899 0.0647199403 -0.0557485967 0.0079183316 -0.0220443507 0.0082555764 -0.0201419903 -0.0875562824 0.0625545132 -0.0165200748 -0.0365204485 0.0333348709 0.0280347554 0.0739959303 -0.0474193724 0.0756131447 0.0897260503 -0.0756567182 0.0102195630 -0.0322517199 0.0107493556 -0.0016697223 -0.0254418774 0.0216249712 -0.0390200348 -0.0611253331 0.0488572165 0.0434080580 0.1119051359 -0.0780545449 0.0101479849 0.0286566014 -0.0210960076 0.0145834375 -0.0023348610 0.0125144674 0.0039328021 -0.0298510162 0.0220971663 -0.0155786601 -0.0088733270 0.0044252766 -0.0214742832 0.0202059122 -0.0291579680 0.0146259319 0.0503574295 -0.0291946840 0.0251987386 0.0068140741 0.0285075192 -0.0017654679 -0.0101237293 0.0049947115 -0.0283906537 -0.0149947083 0.0082619038 -0.0444987242 0.0273039961 -0.0518492297 0.0078677927 0.0292634348 -0.0128076577 0.0116336407 0.0268271021 -0.0135202296 0.0023741155 0.0152999428 -0.0103574792 -0.0154333577 0.0026251310 -0.0166795122 0.0152333308 0.0802371934 -0.0138730329 -0.0226969196 0.0835189114 -0.0105612964 0.0483109527 0.0201197779 -0.0146140850 0.0125551413 -0.0407331142 0.0029200478 0.1073892608 0.0101853847 -0.0348245568 0.0331595126 -0.0931707521 -0.0037539303 -0.0658291429 0.0367834362 0.0131747391 -0.0409738983 -0.0288733597 0.0245547947 -0.1210110989 0.0387951239 0.0077805072 -0.0699465149 -0.0704152641 0.0390786410 0.0264768903 0.0149723110 -0.0397917187 -0.0187912329 0.0317550656 -0.0203780073 -0.0015679337 0.0121921916 0.0049162775 -0.0317517455 -0.0091924753 0.0176693284 0.0050403339 0.0246088542 0.0315224249 -0.0586887162 -0.0073415772 0.0531543525 -0.0131471450 -0.0088376128 -0.0397466107 0.0003878208 -0.0361383161 -0.0251622752 -0.0207761902 -0.0228191964 -0.0698552658 0.0176585591 -0.0668169296 -0.0415367724 -0.0246110060 -0.0089171425 -0.0616548301 0.0408741335 0.0512466406 -0.1122834044 -0.0150635669 0.0335795140 -0.1425823704 -0.1645115319 -0.0774986944 -0.0863406082 -0.0011733438 0.0066792886 -0.0488211895 0.0696696477 -0.0951675173 -0.1382680651 -0.0462689758 0.0804705940 -0.0038095459 -0.0370154901 0.0860539735 -0.1491219093 -0.0005404108 0.0189396224 0.0158226217 -0.0416087776 -0.0352566836 -0.1643327065 -0.0125192714 -0.0028145526 -0.0758070132 0.0023544193 0.0334876473 0.0377528011 -0.0114416113 0.0239306742 0.0724687960 0.0692646753 -0.0438105295 -0.0432630408 0.0557348571 -0.0286117838 -0.0389912184 -0.0787556155 0.0415915341 0.0625629587 0.0160507726 -0.0076064519 -0.0045403236 -0.1672874282 0.0984860587 0.1207680996 0.0067287954 -0.0553872304 -0.0095402193 0.0141386709 -0.0494067310 0.0636329509 0.0087749356 -0.0352906429 0.0079064339 -0.0568610180 0.0464363685 -0.0147138165 0.0192475279 -0.0606049161 0.0006972859 -0.1224911268 0.0505165219 -0.1494403362 -0.1266469469 0.1019208018 -0.1944329947 -0.0608481680 0.0515548770 -0.0684721616 0.0242397272 -0.0310448342 0.0723363361 0.0597613454 -0.0169774492 0.1366233514 -0.0634000671 0.0347650503 -0.0795964904 0.0463767026 -0.0447933239 0.1133621770 0.0161690870 -0.0095843521 0.0775039848 0.0893498739 -0.0272024281 0.1900427215 -0.1154909578 0.0647239035 -0.1973869557 0.0816615897 -0.0660763312 0.1650942773 -0.0778838610 0.0263466728 -0.0895107018 -0.0333732051 0.0154570241 -0.0491984460 -0.0523229407 0.0275411509 -0.0198845981 0.0348319405 0.0192271471 -0.0178322890 -0.0096641396 -0.0272667533 -0.0325856674 0.0525720303 -0.0216118173 0.0028983428 0.0454950255 0.0178148362 0.0167812299 0.0074129482 0.0041373055 0.0040224735 0.0248248915 -0.0425739034 0.0016457305 0.0858719651 -0.0405649583 0.0019803245 0.0575607237 0.0258658261 0.0439200757 -0.0164271828 0.0202802413 0.0187826147 0.0288288109 -0.0642948523 0.0098399987 -0.0444120619 -0.0336879468 -0.0642573730 -0.0860413223 0.0525068435 -0.0805649012 -0.0939200702 0.0829347039 -0.0258319332 0.0116310094 0.0066654926 -0.0243397486 -0.0262282867 0.0242931105 -0.0586840674 -0.0102797952 -0.0026305261 -0.0269351152 0.0111744831 -0.0417587087 0.0084964834 -0.0070602298 0.0087017197 -0.0028648495 -0.0293641642 -0.0039552486 -0.0049032408 0.0132769919 0.0029163181 0.0011544517 0.0050907686 0.0024760089 0.0039808989 0.0088336663 -0.0296352211 0.0080644616 0.0050834983 -0.0150245116 -0.0210992206 -0.0665096141 -0.0163546299 -0.0031940301 -0.0077037751 -0.0309511539 -0.0371495411 -0.0295144809 0.0200445726 0.0127677572 -0.0445953086 -0.0422099919 -0.0442012980 -0.0006846799 0.0763000254 0.0560718497 0.1062264013 -0.0298627742 0.0031220031 0.0131056857 0.0151258172 0.0236229982 0.0130005294 -0.0113409957 -0.0093334095 0.0180245457 -0.0027510642 0.0044102427 0.0052029586 -0.0320887367 -0.0428109643 0.0047022725 -0.0047663423 -0.0234308855 0.0047883128 0.0065620091 -0.0214628116 0.0337783116 0.0675344167 -0.0256188135 0.0531821564 0.0615169770 -0.0388194828 0.0150113738 -0.0226856049 0.0050434318 -0.0220503100 -0.0803864545 0.0489677420 -0.0206391937 -0.0243042123 0.0201818276 0.0201608316 0.0727003630 -0.0325118532 0.0891962939 0.0906567327 -0.0608527766 0.0262703240 -0.0335647428 -0.0024606017 -0.0072240586 -0.0233766224 0.0171275696 -0.0449381767 -0.0368268838 0.0229690640 0.0263343427 0.1174906541 -0.0567290230 0.0170333080 0.0143767319 -0.0172500625 0.0173516751 -0.0040623375 0.0119812297 0.0022600064 -0.0166480367 0.0167785250 -0.0124376186 -0.0070521168 0.0019290616 -0.0062506823 -0.0008178433 -0.0229513853 0.0218186812 0.0331422218 -0.0244418438 0.0299993844 0.0036588177 0.0299949893 -0.0011092620 -0.0060413362 0.0043577290 -0.0323590840 -0.0053644330 0.0033968884 -0.0209407159 -0.0046558473 -0.0402562403 0.0113744415 0.0241619953 -0.0096264551 -0.0042401868 0.0287835972 -0.0082436208 0.0101420363 0.0040674205 -0.0003978274 -0.0118381171 -0.0033255121 -0.0104477695 0.0007725401 0.0359680631 -0.0146507928 -0.0145042307 0.0564320908 0.0295472222 0.0181882791 0.0186652041 0.0096697297 -0.0007092354 -0.0114205591 0.0200211433 0.0476606001 0.0192527926 0.0134453395 0.0137632399 -0.0319834342 0.0366739970 -0.0433706812 0.0215334340 0.0099553300 -0.0374572483 -0.0219160171 -0.0136189977 -0.0719928812 0.0183238589 -0.0048293748 -0.0596298872 -0.0580764639 -0.0463004763 0.0381303798 -0.0360768845 -0.0280995290 -0.0074884288 -0.0049976348 0.0132821197 -0.0011516868 -0.0142197921 -0.0097522545 -0.0391272859 0.0190928855 0.0162299497 -0.0172024339 -0.0110517926 -0.0079861485 -0.0941948362 0.0520472647 0.0407548234 0.0297573433 -0.0133823927 -0.0062959078 0.0229274862 -0.0044242820 -0.0096924667 0.0532647131 -0.0213968187 -0.0125194360 0.0464516761 -0.0068257937 -0.0226761618 -0.0025156209 0.0142761578 0.0461456336 -0.0694875818 -0.0207596404 0.0774018248 0.0026443194 0.0052101965 0.1125479096 0.0846909983 0.0524701106 0.0581720914 0.0098990676 0.0314063511 0.0344909342 0.0557168816 0.2881270051 0.1007499255 -0.0582143586 -0.0378914331 -0.1317564040 0.0709771358 -0.1301765084 0.2398813439 0.0167294940 0.0119071584 -0.0036890098 -0.0736153368 -0.1232195389 -0.4773069284 -0.0080627608 -0.0420234137 -0.2564789285 0.0264224295 0.0885664369 0.1032914456 0.0103370948 0.0519028799 0.1035338385 -0.0242155646 0.0226212300 -0.0068978358 -0.0057237758 0.0181261609 -0.0125074971 -0.0467893125 0.0182426846 0.0059010303 -0.0371200200 0.0207933990 0.0103660878 -0.0610384312 0.0284142336 0.0158472901 -0.0154799789 0.0192510876 -0.0074824176 -0.0047084722 0.0032491019 0.0301896265 -0.0225869131 -0.0111108508 0.0006228360 -0.0358557543 -0.0459391318 -0.0388552983 -0.0254509590 -0.0703531949 -0.0188113507 0.0196508568 -0.0041184169 0.0203511569 0.0195513562 -0.0134572351 0.0272416649 0.0107791562 -0.0058302481 0.0093168407 -0.0021044314 0.0070548754 -0.0112580945 -0.0067021249 0.0033975638 -0.0204703708 0.0122790607 -0.0030769972 0.0134107094 -0.0040804600 0.0085639469 -0.0151708391 -0.0003779040 0.0019111835 -0.0104893013 -0.0098059129 0.0042310288 -0.0257860258 0.0182986983 -0.0068682449 0.0294798951 -0.0093245889 0.0115411478 -0.0229400306 0.0117769910 0.0001279920 0.0096227791 0.0058246819 -0.0011189530 0.0046963483 0.0093431088 -0.0033124862 -0.0020337689 -0.0056738287 -0.0032898939 0.0026352074 0.0013807912 0.0044885352 0.0021314614 -0.0071818568 0.0025432551 0.0023283110 -0.0070859565 -0.0036290100 -0.0023417638 -0.0001087095 -0.0011248435 -0.0004452981 -0.0032948689 0.0065972425 -0.0003492205 -0.0114469298 0.0052122048 0.0052394078 -0.0089534985 -0.0051894465 -0.0061692124 0.0064584788 -0.0053841162 -0.0017547067 -0.0039088607 0.0105373696 -0.0015418703 0.0057415812 0.0058976377 0.0044498082 0.0195850986 -0.0111009842 0.0176740151 0.0227628713 -0.0328687995 0.0014908208 0.0088524371 -0.0558848475 0.0481542071 0.0026372687 -0.0004646786 0.0046778222 0.0009149561 0.0021851521 0.0018777038 -0.0017319886 0.0074953805 -0.0046502427 0.0017627884 -0.0040729105 0.0032983631 0.0088493971 -0.0007088627 0.0081330065 -0.0066661696 -0.0029231527 0.0007259264 -0.0009059229 0.0000392763 -0.0008065696 0.0001120711 0.0040152953 0.0003219672 -0.0017129091 0.0023900543 0.0036936628 0.0209948671 -0.0014398989 0.0103855362 0.0015076312 0.0059525894 0.0219673784 0.0041156731 -0.0063150225 0.0018149877 -0.0099329619 -0.0044057184 -0.0004125400 -0.0081120560 -0.0000466032 -0.0012541739 -0.0077825608 -0.0060306182 0.0035588019 -0.0024862482 -0.0035950599 -0.0090121932 -0.0026847554 0.0035807409 -0.0007383683 -0.0033983014 0.0059923483 0.0013027336 -0.0012722321 0.0045432194 0.0065597813 -0.0025010934 0.0002234401 0.0020370344 -0.0032557115 0.0002467696 0.0052221314 -0.0224224415 -0.0266867939 0.0932070896 -0.0115156638 -0.0581351672 0.0999443018 0.0179157004 0.0079901172 -0.0168432703 0.0245500961 0.0926111457 -0.0999275553 -0.0197014442 0.0449496597 -0.0292546443 -0.0566306360 -0.0450075448 0.1060236145 -0.0081042930 -0.1075667242 0.1558703647 0.0337419484 -0.0178394408 -0.0226295151 0.0099565132 0.0239983965 -0.0377416594 -0.0459918110 0.0597741152 -0.0547905782 -0.1023348642 -0.0729090532 0.1624006473 0.0102478329 -0.0951757463 0.0401257423 -0.0227854598 0.0043732462 -0.0246197693 -0.0363462497 0.1078209229 -0.0532793383 0.0161904650 0.0324155712 -0.0134731896 0.0570728270 -0.0770650899 0.0543980636 0.0136823311 -0.1638926972 0.0645879290 -0.0345163781 -0.0200395768 -0.0463377989 -0.0104461236 0.0388241586 -0.0091102569 0.0409675335 0.0407369135 -0.0189579634 0.1090778330 -0.1256208910 0.0969521796 0.0436992643 -0.0421126042 0.0172833703 -0.0373847030 -0.0179382723 0.0259310971 0.0128060589 -0.0235043100 0.0273150085 0.0085106761 -0.0247740129 0.0267328241 0.0554944965 0.0682492135 -0.0391878868 0.0352165837 0.1244125356 0.1087488863 0.1217466499 0.0521058253 0.0771767250 0.0900519701 -0.0180292760 0.0280155954 0.1899456422 0.0762237221 0.1408069809 0.1131965874 -0.0444031635 0.0615406480 0.0028779611 0.0640413350 0.0429063267 0.0067564472 -0.0662569373 -0.1098203706 -0.0434248478 0.0624757137 0.0320565018 -0.0571511490 -0.1772262206 -0.2603544004 0.0018683752 -0.0271972343 -0.0434900813 -0.0108230453 -0.0139831531 -0.0368837713 -0.0079226790 -0.0190969537 -0.0625063094 -0.0459856918 0.0041767487 -0.0455843382 -0.0147759794 -0.0218189278 -0.0653030008 -0.0739050385 0.0183491609 -0.0298922240 -0.0105280129 -0.0169674666 -0.0477779753 -0.0424014093 0.0056679452 -0.0441257546 -0.0057064819 -0.0162233182 -0.0453245973 -0.0589700093 0.0255634612 -0.0311969757 0.0037626526 -0.0032810113 -0.0068811095 0.0165256415 -0.0013005504 -0.0091731937 0.0002840600 -0.0072202095 -0.0170121051 -0.0039258542 -0.0050856649 -0.0068007363 -0.0020769599 -0.0048165229 -0.0021449411 -0.0156793668 -0.0474306310 -0.0087467740 0.0142333924 0.0023994570 0.0261673123 -0.0111282465 0.0205317629 -0.0343138226 0.0000060002 -0.0038435313 0.0012156853 0.0058940662 -0.0050945715 0.0094869545 0.0009694650 -0.0059867923 0.0062040608 -0.0004219146 -0.0049961557 0.0015488399 0.0007196485 -0.0022942619 -0.0008688007 -0.0069156305 0.0051409473 0.0011906057 -0.0041072508 0.0000071717 0.0043355095 -0.0000118665 0.0018526164 -0.0032305781 -0.0054779031 0.0034581370 -0.0000760186 0.0031200572 -0.0009686217 -0.0065964892 0.0061140723 0.0149198974 -0.0041673368 -0.0045995888 0.0088668337 -0.0070836567 -0.0019294085 0.0042416968 -0.0045728279 0.0102756072 -0.0003279263 0.0057641406 -0.0021808670 0.0025169707 -0.0055689467 0.0113256164 -0.0042895627 0.0110820428 -0.0020959317 -0.0029351270 0.0076946253 -0.0024900761 0.0003715876 0.0028561754 -0.0024592771 0.0054005505 -0.0115127272 0.0007724937 0.0001830746 -0.0019299310 -0.0023704581 0.0025976644 0.0030308329 -0.0024098665 0.0062338200 -0.0019933447 0.0016773087 0.0030047566 -0.0056427829 0.0034059971 -0.0056342051 0.0005122749 -0.0011975054 0.0017443955 0.0084625183 -0.0025275583 0.0114756573 -0.0004749182 -0.0018994601 0.0025120548 -0.0112647982 -0.0241522982 0.0080970933 -0.0384445061 -0.0441240581 0.0272829374 -0.0683615625 0.0141757481 0.0082116607 -0.0094122081 -0.0078019833 -0.0056735606 -0.0190681365 0.0256224212 -0.0070414473 0.0114130209 0.0183553343 0.0081504778 0.0111280096 0.0055391766 0.0027798787 0.0117865289 0.0089465701 -0.0139008002 -0.0020085992 0.0440717522 -0.0165609944 0.0239328515 0.0173616199 0.0139879791 0.0111610717 -0.0009090613 0.0077846694 0.0202724780 0.0081761903 -0.0230130459 -0.0041510125 -0.0275062053 -0.0064939885 -0.0448473368 0.0048031145 0.0006764660 0.0073231908 0.0043331000 -0.0003517748 0.0017228567 0.0005532717 -0.0055322749 0.0031655868 -0.1017769536 -0.0181109796 0.0235730131 -0.0172098460 0.0124744657 0.0053612097 0.1033709224 -0.0979444199 -0.1183090170 0.1246499946 0.0716008040 0.0161667018 -0.0248122929 -0.0625947172 -0.0095824521 -0.0338323063 -0.0003257753 -0.0496525206 0.0080697625 0.0546162293 0.0523240467 0.0090057062 0.0610227416 0.0333808216 -0.1458198550 0.0249506243 0.0753582087 -0.2130642339 -0.1060461415 -0.0163778017 0.0916388548 -0.2910463104 -0.0736807972 -0.1273307451 0.0304977949 0.0120876203 -0.0515981970 -0.0116341597 -0.0308204969 -0.0523208743 -0.0256814777 -0.2592983556 -0.1835264348 -0.0887995058 0.0646847066 -0.0348640173 0.0067688816 0.0249651783 -0.0294525879 0.1213901300 0.1268534687 -0.0250669886 0.0116893411 0.0254363053 -0.2036250213 0.0733191225 0.1204222608 -0.1747768016 -0.0973214890 0.0197309434 -0.1978012643 0.0662300349 0.1247981665 -0.0022654936 -0.0070375380 0.0024772134 -0.0050772848 -0.0069770033 0.0046846631 -0.0025436276 -0.0008268381 0.0032774817 0.0011905425 0.0053980441 -0.0014507594 0.0025372910 0.0021775191 -0.0010294217 -0.0008837162 -0.0067338604 0.0026914603 -0.0098024061 -0.0112121508 0.0078510543 -0.0049147009 -0.0027515753 0.0068185475 -0.0005936569 0.0016140360 -0.0004152939 0.0062873551 0.0055533529 -0.0028390042 -0.0003826430 -0.0095776890 0.0033664967 0.0030509185 -0.0130299036 0.0041119297 -0.0021534458 0.0003814618 -0.0021022753 -0.0008685877 0.0051017025 -0.0038814352 0.0029464026 -0.0007789748 -0.0009732433 0.0030554604 -0.0028182735 0.0024253167 0.0049241308 -0.0216110356 0.0070451207 -0.0049932859 0.0049087171 -0.0042282311 0.0003394717 0.0020945811 -0.0013686619 0.0050366180 -0.0012615483 -0.0010542925 0.0042674561 -0.0005744717 0.0043453556 -0.0035653630 -0.0006861173 0.0005026281 0.0010062143 -0.0030117306 0.0005637339 0.0003486643 -0.0020288360 0.0009199650 0.0025392893 -0.0010271939 0.0020511626 -0.0018042232 -0.0099483599 0.0034305456 0.0021619426 -0.0107294559 0.0008857602 -0.0066500624 -0.0032055265 0.0008257887 -0.0023196262 0.0044231004 -0.0013779127 -0.0145697674 -0.0026886432 0.0015296300 -0.0051803648 0.0101203542 -0.0024872059 0.0077296058 -0.0048023510 -0.0009814211 0.0047819531 0.0040758684 -0.0009025725 0.0150517367 -0.0051130171 -0.0005816135 0.0087741109 0.0100130948 -0.0008086038 0.0004631882 0.0000021271 0.0006420334 0.0013025919 -0.0005679475 -0.0015380714 0.0028884546 -0.0002468175 -0.0021404661 -0.0002875016 0.0015640522 -0.0003029679 0.0044944895 -0.0015014528 -0.0040380007 -0.0008115324 0.0016255262 0.0003522242 0.0018892445 -0.0006654730 -0.0018826918 -0.0024199086 0.0020999579 0.0003642536 0.0036346543 -0.0012161415 -0.0022481158 -0.0051875412 0.0035060666 0.0021652316 -0.0052309329 -0.1550479157 -0.0582915467 0.2010544906 -0.1829410478 -0.0489298075 -0.0979681436 -0.2984431637 -0.1831176864 -0.0117026580 -0.1129772988 -0.0259801508 -0.0569651026 0.0710326140 0.0799311250 -0.0233483105 0.2118012646 0.1098874553 -0.1346081844 0.0902957660 0.0195167058 0.0467319012 0.0024165173 0.1496734416 0.0104420647 0.0316542102 -0.0517610731 -0.0475921978 0.1528588709 0.0572941126 0.0010935245 0.1215533771 -0.0124829811 0.0097506694 0.0375847428 -0.0701677173 0.0191826228 0.0082469878 -0.0955835696 -0.0067351012 -0.0134254572 0.0509755856 -0.0329744003 0.0436645004 -0.0002380861 0.1424290416 -0.1341195707 -0.0665674006 0.0402817102 -0.0450256029 0.0207501403 0.2538180283 -0.1992879336 -0.1293174680 -0.0472173111 -0.1324257140 0.0575686518 0.0618277627 -0.0367019659 -0.0038875967 0.0292709970 -0.0365396044 0.0283018407 -0.0066880571 -0.0467626006 -0.0221326407 0.0826194991 0.0733391755 0.0575118754 -0.0486061039 0.0046196786 -0.0404421442 -0.0269547929 0.0371593309 -0.0483823016 -0.0175644336 0.0188377370 -0.0152964815 -0.0061651710 -0.0173474187 0.0252205914 0.0119215697 0.0012407907 0.0523917660 -0.0242893998 0.0072234463 -0.0330760771 0.0047034322 -0.0248304790 0.0333516495 -0.0140918981 0.0008032388 0.0209358829 0.0239524231 0.0039779817 0.0764868403 -0.0344081148 0.0143231298 -0.0765348060 0.0177431818 -0.0378902529 0.0503966507 -0.0292661268 -0.0057963998 -0.0144647500 -0.0123014403 0.0026863276 -0.0016549022 -0.0247083676 0.0110253125 0.0184353990 0.0219257811 0.0121269046 -0.0064239378 -0.0022257811 -0.0147623054 -0.0040069679 0.0257115165 -0.0080237128 -0.0083183906 0.0188542693 0.0154729315 -0.0034645336 0.0013151323 0.0055538912 0.0020400950 0.0092810251 -0.0209536680 -0.0068114137 0.0413934417 -0.0175374125 -0.0153327474 0.0191973518 0.0259542359 -0.0017426323 -0.0094082105 0.0127518083 0.0094118487 0.0084664608 -0.0338688721 -0.0096170739 -0.0151245171 -0.0212785107 -0.0036957869 -0.0500791158 0.0292717031 -0.0431558806 -0.0598842050 0.0506335186 0.0044730321 -0.0424888856 0.0582036730 0.0254916931 -0.0037881606 -0.0021871605 -0.0053419213 0.0007027375 -0.0033465531 -0.0098425320 0.0101209284 -0.0166683061 -0.0140499033 0.0032174847 -0.0007585600 0.0050015139 -0.0098912304 -0.0112395135 0.0073077714 -0.0166987556 0.0029295412 0.0019692646 0.0009258224 0.0032778890 0.0016119273 0.0049493194 -0.0085322818 -0.0038694413 -0.0046942383 -0.0108576354 -0.0058743175 -0.0395147362 -0.0279083237 0.0128862364 0.0065094383 -0.0301396504 -0.0189342942 -0.0094473673 0.0115216877 0.0245179856 -0.0463091729 -0.0172657513 -0.0024027698 -0.0266708756 0.0384970964 0.0013324343 0.0043999732 -0.0098077127 0.0067526654 0.0014151389 0.0018763022 -0.0056441081 0.0007919640 0.0043971099 -0.0032246621 0.0015675759 0.0118898911 0.0054885746 -0.0085845210 -0.0097396103 -0.0055578234 -0.0060343147 -0.0166059376 -0.0085249550 -0.0073445255 -0.0056269999 -0.0033592678 -0.0424385045 -0.0475776841 0.0374817183 -0.0550467782 -0.0730764539 0.0595661823 -0.0102590140 0.0201683927 -0.0135983669 0.0329069589 0.0920768232 -0.0717464329 0.0059120616 0.0254617620 -0.0127837127 -0.0373900149 -0.0696956914 0.0607765433 -0.0772951682 -0.1209910117 0.1072270091 -0.0200683746 0.0316661570 -0.0080747611 0.0251328956 0.0226589826 -0.0279140771 0.0059564997 0.0269477967 -0.0146560515 -0.0510241278 -0.1211740172 0.0948711719 -0.0710433196 0.0853789585 0.0038910868 -0.0092195244 -0.0226692379 -0.0016424392 0.0509496747 -0.1034578284 0.0149870515 0.0179126136 0.0010527934 0.0073446329 -0.0485125282 0.1028988245 0.0136141306 -0.1139596594 0.1237535565 -0.0063042200 -0.0214872949 -0.0318840050 -0.0197479759 0.0220230151 -0.0411349422 -0.0073365456 0.0379593497 0.0182699781 -0.0013569956 -0.0673978083 0.1739596514 0.0159941950 0.0229990079 -0.0369274970 0.0116711143 0.0094848572 -0.0350810441 0.0121042311 -0.0539752017 -0.0056085982 -0.0303189352 0.0371670602 0.0444049872 0.0020106178 0.0335258190 0.1319701333 -0.0435181616 -0.0149201204 0.1137475715 -0.0556564946 0.1015708383 0.0308647805 -0.0267392398 0.0517563572 -0.0637309109 -0.0027267566 0.2057323763 0.0206335419 -0.0452265616 0.0823370423 -0.1361674737 -0.0065643694 -0.0717278113 0.0579321057 0.0011158824 -0.0252030763 -0.0440317535 0.0319980525 -0.1661763752 0.0668585637 0.0120938604 -0.0678668391 -0.1036014926 0.0722802289 -0.0913252498 0.0393727104 0.0370457953 -0.0088242255 -0.0118151105 -0.0023908494 -0.0677308561 0.0160092405 0.0279295609 0.0671204701 -0.0561941591 -0.0563993947 -0.0773294007 0.0234205351 0.0379401033 0.1831560069 -0.1130481670 -0.1289216225 -0.0878961607 0.0308645861 0.0446703456 -0.0132576198 -0.0113439456 -0.0016464255 -0.1510969579 0.0621895703 0.0801860267 -0.0109483960 -0.0114610158 -0.0030814292 -0.0150490651 0.0145103208 0.0158096526 -0.0543423348 0.0170839926 0.0161177189 -0.0001680322 0.0358209898 0.0433534326 -0.0055377431 0.0100526217 0.0107869084 0.0129271558 0.0256302917 0.0119648124 0.0724345367 0.1756154893 0.0272435066 -0.0562157901 0.0062238320 -0.0913326331 0.0489632013 -0.0614394812 0.1215108129 -0.0005031341 -0.0032633800 0.0030659563 0.0115787221 -0.0077355073 0.0184228845 0.0040154904 -0.0090320952 0.0137355819 -0.0020142460 -0.0028186154 -0.0002713613 -0.0028557801 -0.0000432434 0.0037686006 -0.0141403392 0.0125805071 0.0101005046 -0.0098431015 0.0084369235 0.0061836877 0.0004029154 0.0059005910 -0.0098526099 -0.0121071415 0.0084177939 0.0006935989 0.0142925387 0.0006281653 -0.0133531606 0.0030763837 0.0185371923 0.0060229944 -0.0081089118 0.0094175605 0.0059794005 -0.0013256084 0.0039460524 0.0036023890 0.0030121690 -0.0096948050 -0.0009605223 0.0155485173 -0.0125985876 -0.0048212694 0.0123563957 -0.0098535236 0.0227505159 0.0456113732 -0.0250767350 0.0635824387 0.0187565549 -0.0102294298 0.0200911341 -0.0209172118 0.0102143031 -0.0325791379 -0.0080924148 0.0057561814 -0.0210428972 0.0081473559 -0.0029682634 0.0002152643 -0.0198556875 0.0109350731 -0.0360930435 -0.0146483393 0.0071903576 -0.0305650373 -0.0007487236 0.0032034601 -0.0082952251 0.0206619653 -0.0098044969 0.0198561577 -0.0273833026 0.0133779279 -0.0475752775 0.0105922995 -0.0089092370 0.0172574252 0.0125422267 -0.0097732834 0.0237939698 0.0066907687 -0.0038124661 0.0153592498 0.0024023050 -0.0017809363 0.0065387510 0.0019196457 0.0042050356 0.0145801656 -0.0049701256 0.0057382870 -0.0087253000 -0.0079184685 0.0032785561 -0.0086727256 -0.0059383662 0.0035529617 -0.0036033226 -0.0036168199 0.0058259867 -0.0035744867 -0.0122240863 0.0089305311 -0.0181238748 -0.0125877320 0.0074655715 -0.0191138985 -0.0067082160 0.0032283908 -0.0097127161 -0.0059201398 0.0048902304 -0.0089882533 0.0091456624 0.0023070874 0.0304457737 0.0170783930 -0.0092555685 0.0152066449 0.0175589339 -0.0249103334 0.0023788218 -0.0002319498 -0.0064340288 0.0031521375 0.0149670305 -0.0203865922 0.0058375127 0.0058381770 -0.0160197970 -0.0149394248 0.0107086538 -0.0323961584 -0.0113440065 -0.0118391515 0.0022786569 0.0020513048 -0.0386552487 -0.0138936002 -0.0007460278 0.0017068397 -0.0010755041 0.0052706047 0.0021592535 0.0025742229 0.0020118578 0.0062464078 -0.0281310500 -0.0210469532 0.0126934122 -0.0328041715 -0.0252383479 -0.0961068560 -0.0424191345 0.0080681790 -0.0054810383 -0.0380471471 -0.0712885492 -0.0159269285 0.0313943336 0.0435195180 0.0163134188 0.0084824279 -0.0013638380 0.0068291715 -0.0186560381 0.0064638674 -0.0062394898 -0.0022797789 0.0083858260 0.0115406603 0.0132587214 0.0088318693 0.0099498951 -0.0104092813 -0.0155105737 0.0122417593 0.0106204299 0.0076835604 0.0120222811 -0.0346705439 -0.0278397027 0.0158519483 -0.0273235899 -0.0186776560 0.0180318779 -0.0340620392 -0.0301059271 -0.0002407343 -0.0035308265 -0.0037370646 -0.0032879775 -0.0024287839 -0.0020414486 -0.0012676144 0.0030540616 -0.0005150073 0.0003404784 0.0028343455 0.0007482462 0.0023448333 -0.0016285658 0.0008457867 0.0014646871 -0.0038455052 -0.0033158725 -0.0078567462 -0.0041438015 -0.0019217591 -0.0026016522 0.0051785705 -0.0000243430 -0.0009475628 0.0014595467 0.0007862105 0.0056738032 -0.0030600074 0.0036470867 0.0031270811 -0.0063593847 -0.0039414135 0.0030596092 -0.0156913593 0.0039328344 -0.0028606409 0.0007253983 -0.0036498308 -0.0055458628 0.0166784037 -0.0085908562 0.0037181564 0.0009831051 -0.0024887474 0.0087222675 -0.0115058766 0.0047229877 0.0075418157 -0.0292505523 0.0084976247 -0.0007179975 -0.0024869735 -0.0019593727 -0.0016677609 0.0077008205 -0.0026250960 0.0082066927 -0.0025050178 -0.0017454214 0.0161003815 -0.0185425619 0.0106175840 -0.0046947698 0.0006996716 0.0002300474 0.0009942376 -0.0011311011 0.0000068565 0.0015756451 -0.0026187060 0.0034445175 0.0002959759 -0.0016282419 0.0019245953 0.0011225494 -0.0140964846 0.0066640513 0.0051065082 -0.0158904793 -0.0004241916 -0.0057253777 -0.0050028090 -0.0000470923 0.0009967389 0.0064009377 -0.0041891713 -0.0178620518 -0.0047502771 -0.0003436882 -0.0035716615 0.0140707120 -0.0078920837 0.0146865770 -0.0066440627 -0.0021322983 0.0113039747 0.0070326288 0.0000001243 0.0263199107 -0.0068706664 -0.0007118211 0.0173488732 0.0162618822 0.0030651139 -0.0005400277 0.0103336571 -0.0040109755 -0.0010540803 0.0067865649 -0.0141913686 0.0071691869 0.0051568061 -0.0069677452 -0.0032047022 -0.0012798646 -0.0036696449 0.0154475036 0.0039983170 -0.0062239949 -0.0013703376 -0.0071485099 0.0032571850 -0.0056652234 -0.0018384850 -0.0172484843 -0.0143970801 -0.0015557704 -0.0073518749 -0.0074129753 -0.0047983814 -0.0237888459 -0.0237132157 -0.0035527107 -0.0029522782 -0.0441623930 0.0552418540 0.0481695182 -0.1775066089 0.0847156563 0.0331385400 0.0163697233 0.1492332697 0.1325647143 -0.0412841961 0.0186984152 0.0208849176 0.0591462489 0.0547110164 0.0457671713 0.2866798197 0.5717118546 0.0821284402 -0.1861059883 -0.0241871949 -0.3369190451 0.1382928516 -0.2454876374 0.4302770362 -0.0241858872 -0.0188174078 0.0365050739 0.0216540330 -0.0906514031 -0.0001066548 -0.0036942138 -0.0763657425 0.0317088238 -0.0031082846 0.0086734244 -0.0072016001 -0.0177328235 0.0037025328 0.0624783922 -0.0461346345 0.0517800733 0.0259872583 -0.0606281752 0.0780714454 0.0095717388 0.1349400539 0.0120808487 -0.1515050605 -0.0327019940 0.0344269272 -0.0158201395 0.3023929607 -0.0432960166 -0.1797994457 0.0224052921 0.0067055940 -0.0026752866 0.0215563470 -0.0629012149 0.1218896367 0.0329650603 -0.0181794409 0.0128473469 0.0089101573 0.0306961704 0.0188696541 0.1011403278 -0.1098087113 -0.0246125420 -0.0644641293 0.0039758035 -0.0349352153 -0.0219179801 0.0487158207 -0.0526172986 -0.0152277246 0.0252031996 -0.0147198433 -0.0092221411 -0.0178003296 0.0326549906 0.0042409609 0.0095941111 0.0520162269 -0.0154930725 0.0038805841 -0.0228961585 0.0089334505 -0.0308237065 0.0407870380 -0.0201266320 0.0055582384 0.0271946173 0.0145064555 0.0182714239 0.0761267292 -0.0222747751 0.0093042228 -0.0676087920 0.0237265788 -0.0486596436 0.0587778543 -0.0405556357 -0.0094700902 -0.0101831870 -0.0163743739 0.0006510208 0.0097019675 -0.0270477795 0.0063534252 0.0435683653 0.0224219684 0.0136517304 -0.0068932478 0.0013930362 -0.0191766236 0.0014836479 0.0243934019 -0.0080632740 -0.0159648041 0.0200246280 0.0168763186 -0.0100143455 0.0016327275 0.0049135025 -0.0010468797 0.0088158573 -0.0232890658 -0.0095615684 0.0408066263 -0.0182804343 -0.0273604559 0.0204638951 0.0266061577 -0.0087710675 -0.0151080030 0.0161011921 0.0084612032 0.0080851871 -0.0362656086 -0.0124224743 -0.0076480918 -0.0272012478 0.0115114437 -0.0397971906 0.0288641843 -0.0457802714 -0.0493789048 0.0168450263 -0.0291789415 -0.0350451464 -0.0133927405 0.0962630388 0.0008606381 -0.0018325820 0.0084293592 -0.0004895802 0.0005738894 0.0081027899 -0.0062524022 0.0102999483 0.0053825876 0.0016214120 0.0001003104 -0.0025631445 0.0075676183 0.0064844419 -0.0009685107 0.0034135339 0.0029183416 -0.0009037415 -0.0000184874 -0.0014375257 -0.0008691510 -0.0055233879 0.0070661782 0.0022119154 0.0001804250 0.0077528893 0.0046099216 0.0261374196 0.0175925926 -0.0052807656 -0.0023105075 0.0165059635 0.0161229031 0.0032156138 -0.0063817116 -0.0125697694 -0.0110195679 -0.0079573386 -0.0048658047 0.0007253171 0.0181957547 0.0119530770 0.0243594682 -0.0008900450 -0.0034069358 -0.0011880439 -0.0014929615 0.0032219598 -0.0004088353 -0.0011776146 0.0025891844 -0.0000810849 -0.0068026374 -0.0031994550 0.0012938647 0.0082953750 0.0056109139 0.0013346874 0.0100504056 0.0073885492 0.0023826898 0.0047764283 0.0025533727 0.0116448698 0.0233684550 -0.0261320079 0.0185067966 0.0300127762 -0.0362186406 0.0053562819 0.0037390703 -0.0049482209 -0.0126924653 -0.0487481717 0.0415207180 -0.0033851793 -0.0216969879 0.0178868982 0.0219448397 0.0406100518 -0.0413385910 0.0282654655 0.0461818969 -0.0531828303 0.0083953527 0.0211580969 -0.0164119439 -0.0048236307 -0.0143144866 0.0172182956 -0.0070931743 -0.0350158011 0.0297931278 0.0390012596 0.0659948140 -0.0686467964 -0.0492458793 -0.0645817406 0.0743330881 -0.0424371948 -0.0167287425 -0.0327386263 -0.0123073959 0.0680582983 -0.0634120254 0.0443741930 0.0358375819 -0.0041800903 0.0380846366 -0.0234349034 0.1029786597 -0.0790832970 -0.1414332352 0.1047275284 -0.0704754866 -0.0689699317 -0.0825200856 -0.0007835968 0.0197909708 -0.0243860820 0.1104059213 0.0504957718 -0.0168733065 0.1020899566 -0.0333049032 0.1714643622 -0.0081244339 0.0184994268 -0.0062406367 0.0090103294 0.0128112148 -0.0077421004 -0.0313472681 -0.0405606853 0.0089470415 0.0391505277 -0.0016051705 0.0348984017 -0.0062151590 -0.0707227877 0.0341744766 0.0291618161 -0.0678729775 0.0156669889 -0.0390397065 -0.0168998863 0.0257374685 -0.0150613402 0.0231610947 -0.0142036231 -0.0895358879 -0.0076564911 0.0450862443 -0.0365647659 0.0599445245 -0.0307233663 0.0645414644 -0.0368642491 0.0118002173 0.0378975821 0.0156866701 -0.0170495065 0.1136492333 -0.0337944548 0.0281069708 0.0655998398 0.0550523651 -0.0339746901 -0.0426163798 0.1673692503 -0.0152967422 0.0021145156 0.1093897505 -0.1385183410 0.0178434393 0.1041024108 0.0178233637 0.0510303237 -0.0692998584 -0.0347100374 0.0868555654 0.1253866221 0.0834193911 0.1684220916 -0.1864573497 -0.0102272480 -0.1398244813 0.0308465402 -0.1180608244 -0.1113377260 -0.0552498005 -0.0561869861 -0.2514958127 0.0266607633 -0.1712763318 -0.1817852818 -0.1146523940 -0.0332761415 0.0041966276 -0.0103595725 -0.0155365268 0.0360329447 -0.0121818656 -0.0159915103 -0.0058884514 -0.0221563809 -0.0423146909 -0.0144952992 -0.0089587845 -0.0112372581 -0.0140573309 -0.0121046185 -0.0244213577 -0.0476851467 -0.1325600683 -0.0466034744 0.0315068593 0.0116379590 0.0584830368 -0.0390274847 0.0584616671 -0.1125939522 0.0272438985 0.0210306945 0.0248405100 0.0350391093 0.1380892019 0.2667098452 0.0463118699 0.0965233825 0.1642477314 0.0028781592 0.0257321987 0.0152678371 -0.0045823240 0.0373736657 0.0534436062 -0.0436391099 0.0530508568 0.1005769627 -0.0131715186 0.0272576893 0.0445996778 -0.1028439988 -0.0157605531 0.0369628542 -0.0606502832 0.0182775210 0.0241548538 -0.1069484717 -0.0224337947 0.0238269156 0.0279874236 0.1151561886 0.1161737261 -0.0536387580 0.1009887250 0.0703820697 0.0073335076 0.0266486614 0.0561971780 -0.0204361425 -0.1138948629 -0.0706651415 0.1344586898 -0.1309320305 -0.0117658844 -0.0912712711 0.0089469842 -0.0440041491 -0.0151819375 0.0577276702 -0.0520557799 -0.0138631076 0.0309552617 -0.0145304896 -0.0175374107 -0.0168747053 0.0324198805 0.0012671419 0.0150063063 0.0583898266 -0.0144538859 0.0041662404 -0.0252842255 0.0073861889 -0.0346483991 0.0416056442 -0.0287154733 0.0095873580 0.0274952130 0.0165424932 0.0262788623 0.0934771815 -0.0159749728 0.0073228563 -0.0705407864 0.0242316165 -0.0573179751 0.0613050935 -0.0518128893 -0.0133964707 -0.0065548818 -0.0138219580 -0.0041840855 0.0292071060 -0.0278945697 0.0034168628 0.0739360219 0.0296031933 0.0165211382 -0.0037583886 0.0046394607 -0.0233045121 0.0099315708 0.0280492704 -0.0077774563 -0.0247699765 0.0215576902 0.0224628079 -0.0182313344 0.0003221802 0.0074616298 -0.0038213724 0.0091116286 -0.0267662549 -0.0155121695 0.0457772145 -0.0194177254 -0.0435845142 0.0194721213 0.0377914843 -0.0223893422 -0.0193888398 0.0199540057 0.0040566303 0.0063720844 -0.0426077192 -0.0234022877 -0.0022731862 -0.0345746345 0.0324566078 -0.0341022322 0.0297441005 -0.0535140246 -0.0457815355 -0.0015857752 -0.0417177190 0.0127567129 -0.0271222348 -0.0595474852 0.0036542696 -0.0047438953 0.0127614248 0.0011286711 -0.0003799908 0.0085467729 -0.0032915021 0.0087078338 0.0005925572 -0.0000668753 -0.0017998293 -0.0016365826 0.0078590124 0.0060867102 0.0128367659 0.0078080929 -0.0001326193 -0.0004581538 -0.0001784788 -0.0030006795 -0.0019858161 -0.0042292672 0.0090350922 -0.0007222913 -0.0022872224 0.0065505212 0.0061691614 0.0251927905 -0.0019013727 0.0203203879 -0.0025445909 0.0172021124 0.0302237148 -0.0000981899 0.0043893398 0.0079064170 -0.0114524004 -0.0140130586 -0.0098569465 0.0021453100 0.0258130502 0.0195694603 0.0290554867 -0.0003928351 -0.0064691610 -0.0020040959 -0.0041137797 0.0006227039 -0.0010457595 -0.0016917190 0.0002501656 0.0001951827 -0.0068399026 -0.0035520017 -0.0032043134 0.0102727629 0.0106641312 -0.0017225567 0.0041295314 0.0079229992 -0.0012718737 0.0018652692 0.0053046555 -0.0269092915 -0.0778342432 -0.0653879159 -0.0882241594 -0.0841112571 -0.0193877879 -0.0323516566 0.0548772623 -0.0151114137 0.0205328662 0.0751735510 -0.0088747705 0.0411429656 -0.0275710746 0.0142500557 0.0106696840 -0.0910407042 -0.0517798316 -0.1733783155 -0.1279779364 -0.0015855216 -0.0670691667 0.1210179150 -0.0080538631 0.0028311131 0.0315292762 0.0062488061 0.0970025898 -0.0625164782 0.0715899011 0.0446339594 -0.1519279487 -0.0610369053 0.0534076930 -0.0481377722 -0.0269207240 0.0085514344 0.0204513254 0.0112955936 -0.0258407568 0.0549628241 0.0097416674 -0.0168793011 -0.0329157407 -0.0052497708 0.0178873637 -0.0619396359 -0.0515007812 0.1093678975 -0.0624606769 -0.0265415578 0.0217089180 0.0369319864 0.0319449268 -0.0018874485 0.0319960406 0.0209005430 -0.0487760739 -0.0752003163 0.0134156305 0.0154353578 -0.1012907633 -0.0675970890 -0.0630104736 -0.0009393339 0.0090068235 0.0369610647 -0.0323396213 0.0015494795 0.0653648407 0.0253955451 0.0279711380 -0.0226165892 -0.0224090660 0.0002123160 0.0504872116 0.0455915611 -0.0080915644 0.0047826287 0.0060042100 -0.0874324802 0.0656105564 -0.0293732537 -0.1208863656 0.0810083075 -0.0015061009 -0.0026831172 0.0762475748 -0.0687303062 -0.2190812650 0.0913336440 -0.0133894165 0.0112172330 0.0061793268 -0.0029969584 -0.1077603784 0.0619547928 0.0341091804 0.0872931865 -0.0194170379 -0.0177214587 -0.1466968924 0.0671602188 0.0557851098 0.2325142760 -0.0046633852 -0.0571259432 -0.0169902375 -0.0443313843 -0.0525305059 -0.0133934949 -0.0016907528 -0.0387429336 -0.0967913511 -0.0809585157 0.0376388714 -0.0538576979 -0.0098450801 -0.0701040924 -0.1597619035 -0.1363563369 0.0698941797 -0.0291162267 0.0251103810 -0.0444875103 -0.0590312621 -0.0490150508 0.0283712076 -0.0639943418 0.1010686685 -0.0556295841 -0.0516427903 -0.0513993734 0.0636580432 -0.0549273389 0.0009965490 -0.0069251715 -0.0152979553 0.0286544278 -0.0047682987 -0.0185598558 -0.0051403826 -0.0111725876 -0.0414123538 -0.0239534007 -0.0101208761 -0.0133845551 -0.0112282567 -0.0095265858 -0.0259320364 -0.0295728886 -0.1080993089 -0.0505823148 0.0192756950 0.0124245614 0.0380711708 -0.0349057302 0.0495953401 -0.0990471238 0.0105883846 0.0018687273 0.0830619638 -0.0778298696 0.0736611852 0.0766893410 -0.0060875752 0.0702387235 0.0813532724 0.0426340115 0.0436986830 0.0759741540 0.0149703063 0.0156942284 0.1385103407 0.0856607926 -0.0151915331 -0.1084614671 0.0811285421 -0.0453601927 -0.0313021789 0.0632332052 -0.0563404940 -0.0515757570 0.0517515821 -0.0015891560 -0.0410198936 0.0149554840 -0.0718409159 -0.0944803736 0.0743859203 0.1043208418 -0.1009422025 0.0142305743 -0.0476254273 0.0715794181 -0.0251293497 0.0073691811 -0.0225472622 -0.0729492394 0.0614295549 -0.0481707360 -0.1641415895 -0.0801207064 -0.0296224933 0.1354005618 -0.0244642109 0.0676207428 0.0148086915 -0.0393653463 0.0431768681 0.0136848285 -0.0177396241 0.0129755801 0.0188076110 0.0080342385 -0.0158050040 0.0051589720 -0.0083271865 -0.0389788567 0.0089158983 0.0035955392 0.0139148053 -0.0058441541 0.0248543575 -0.0246076384 0.0170082738 -0.0087275645 -0.0193025027 -0.0016755591 -0.0164286888 -0.0549175772 0.0067752375 0.0031531832 0.0366226451 -0.0148211024 0.0364295621 -0.0353544694 0.0673976628 0.0147470393 0.0122475893 0.0017187857 0.0168688899 -0.0642698690 0.0135251951 0.0127908906 -0.1310389336 -0.0329566838 -0.0139196964 -0.0074347129 -0.0081462640 0.0202054650 -0.0258031259 -0.0240203176 0.0027705579 0.0305123813 -0.0126390555 -0.0258013272 0.0300344799 0.0046249594 -0.0108531543 0.0077907551 -0.0037872583 0.0206900050 0.0240054300 -0.0364097258 0.0118104216 0.0544556810 -0.0065486098 -0.0452563002 0.0429021486 0.0233939250 -0.0225983996 0.0027368475 0.0032458674 0.0362653261 0.0422110230 -0.0100011942 0.0340382994 -0.0683637121 0.0046200022 -0.0201064008 0.0469660069 0.0170497868 -0.0253512030 0.0459487154 -0.0159619656 0.0068005558 0.1055242495 -0.0114090397 0.0229989993 -0.0360956828 -0.0028246731 0.0051914458 -0.0197266329 0.0056607193 -0.0093336384 0.0066211992 -0.0018466448 0.0011715087 -0.0003572140 -0.0040280867 -0.0012435610 -0.0002973672 -0.0014351788 -0.0015632494 -0.0012687070 -0.0000834048 0.0006553092 0.0005236089 0.0084922559 -0.0166790936 0.0037932029 0.0062846905 -0.0104982022 -0.0118584504 -0.0108331737 -0.0044236882 0.0010320803 -0.0005861335 -0.0089317762 -0.0014580274 -0.0091196801 0.0022191140 -0.0001050674 0.0211682689 0.0143508847 0.0055355210 0.0054021491 -0.0309860163 -0.0142692555 -0.0237571758 0.0022777792 0.0020378899 0.0003506008 0.0015382867 0.0022186436 0.0003819010 -0.0003790366 0.0013425751 -0.0006028557 -0.0007943358 -0.0002496910 0.0087490561 -0.0187466247 -0.0217204794 0.0052887041 -0.0036897889 -0.0150668144 0.0042193085 0.0000069431 -0.0101234487 -0.0055745520 -0.0450539010 -0.0543392411 -0.0240124611 -0.0136826149 -0.0589193868 -0.0105128290 0.0330883515 -0.0137364669 -0.0060874533 -0.0192861984 0.0463749701 0.0289884932 -0.0305418618 0.0109337431 0.0328789931 -0.0129234019 -0.0860487561 -0.0637498092 0.0055903036 -0.0951658450 -0.0225789660 0.0929123937 -0.0285992756 -0.0097838342 0.0019520138 0.0280249939 0.0735353363 -0.0417624118 0.0400604790 0.0772177897 -0.0063190990 -0.1327895487 -0.0477549168 -0.0302093202 0.0761214468 -0.0255886179 -0.0268393872 -0.0201536168 -0.0054492353 0.0291762328 -0.0468557120 0.0411706632 0.0433199835 0.0135123627 0.0297528611 0.0000041488 0.1161923123 -0.1006190253 -0.0878885207 0.1016656403 -0.0453053788 -0.0756775485 -0.0577556274 -0.0124307087 -0.0023102109 -0.0335456792 0.1112551581 0.0748694920 -0.0056371653 0.0833037758 -0.0092208617 0.1724413706 -0.0543537466 0.0247577598 0.0001829701 0.0289345021 -0.0009323701 -0.0061622734 -0.0607768801 -0.0457671752 -0.0114021431 0.0219692333 -0.0008453700 0.0136636558 0.0233859243 0.0792939552 -0.0418554352 -0.0056833783 0.0709236804 -0.0486954851 0.0531294758 -0.0129295160 -0.1232025959 0.0491092241 -0.0109546637 0.0555884583 0.1043184409 -0.0540948232 -0.2222985983 0.0822629541 -0.0298471172 0.1286673730 -0.0605289201 -0.0024713834 -0.1201255447 -0.0018405355 -0.0051359371 0.0639160458 -0.1418991917 -0.0259918989 -0.1904314934 -0.0163574569 -0.0175980469 0.1549774192 -0.0325821430 -0.0575428579 0.0323494101 -0.0002983427 -0.0534450479 0.0522212171 -0.1250058233 0.0024733775 0.0413936344 0.0339491850 -0.0173266267 -0.0481888440 -0.2293134707 0.0246967041 0.0483857428 0.0836109440 -0.0194791220 -0.1159442951 -0.0572486063 0.0251147306 0.1116829884 0.0621483980 -0.0024772390 -0.0098978424 -0.1080308811 0.0785033783 0.1948584033 0.1296722270 0.0143949763 -0.0415154685 0.0105744913 0.0100877606 0.0176114441 -0.0169985852 -0.0071333582 0.0325836628 0.0081952796 -0.0054605245 0.0533278368 0.0656739753 0.0304989942 0.0230099253 0.0057144834 0.0129533349 0.0334933010 -0.0475630290 0.0198522857 0.0739545213 0.0370950173 -0.0004884828 0.0521404118 0.0365134354 0.0055317327 0.0359674942 -0.0015992534 0.0044761786 -0.0006691043 0.0057685186 -0.0000718674 0.0015943678 0.0010766425 0.0004490837 0.0022650373 -0.0009440386 0.0070578699 0.0053953376 0.0021197015 0.0058315488 0.0013443368 -0.0213961975 0.0089630701 0.0279566024 -0.0241271764 0.0186604903 0.0160060757 -0.0092478461 0.0050569456 0.0049995666 -0.0152767869 0.0024871530 0.0105855834 0.0111407002 0.0010419315 0.0060488219 -0.0085214595 -0.0284380875 0.0156217719 0.0135311748 -0.0119199493 0.0075990334 0.0134507812 -0.0081501517 -0.0012075438 0.0109192957 0.0027729726 0.0023590678 0.0136158671 0.0014820132 0.0027831943 0.1561051007 -0.0648939931 0.1241038344 0.0298652380 -0.0147969301 0.0550005259 0.0100410163 -0.0046362634 0.0236908251 0.0028819958 -0.0142636657 0.0078080548 -0.0111630817 0.0086879805 -0.0151266433 -0.0041594053 -0.0034147031 -0.0003554905 -0.0232862376 -0.0018105234 -0.0173351419 -0.0158311611 -0.0014994962 -0.0098269904 -0.0159165943 0.0129637468 -0.0220220442 0.0057537870 -0.0079862598 0.0013771493 -0.0236032550 -0.0051903164 -0.0194037515 0.0630613426 -0.0121939954 0.0359233312 -0.0375863599 0.0257003774 -0.0959673156 -0.0433683448 0.0363400940 -0.1666495697 -0.0233120612 0.0001854123 -0.0244938582 -0.0158119649 0.0087084297 -0.0426803023 -0.0034804066 -0.0035146882 0.0309886659 0.0072581410 -0.0134965080 0.0342270685 0.0091053308 -0.0072982899 0.0160485635 0.0044533609 0.0026733232 0.0276198644 0.0010047683 -0.0038996435 0.0552829139 0.0149150085 -0.0271221456 0.0511866610 0.0198541432 -0.0125563157 0.0240425743 0.0151127418 0.0078079812 0.0535887946 -0.0349339822 0.0201218473 -0.1031980009 -0.0390244168 0.0096183179 0.0128561966 -0.0431803238 0.0227701426 0.0199943727 0.0011644280 -0.0057166290 -0.0169283105 -0.0207715739 0.0163028654 -0.0370362463 -0.0025678810 -0.0136137195 -0.0434826052 0.0227637581 -0.0495234022 -0.0202999300 0.0002733132 0.0077449636 0.0049275319 -0.0144230661 -0.0137834923 -0.0212976171 -0.0110313382 -0.0086994041 -0.0097986380 0.0017407815 0.0079364758 0.0075025384 0.0077856393 -0.0591972703 -0.0207751942 0.0252699871 -0.0589910686 -0.0515657165 -0.0583088633 -0.0286012110 -0.0173403728 0.0131197512 -0.0581781002 -0.0497593176 -0.0207820975 0.0051620661 -0.0097880678 0.0120625206 0.0062913590 -0.0183896960 -0.0052934967 -0.0402133069 -0.0377566946 -0.0355297867 -0.0165869895 0.0047035466 0.0068402897 0.0139973916 0.0125966454 0.0060974188 0.0000829537 0.0023499404 0.0050668579 0.0077989858 0.0079903152 0.0335422676 -0.0730406489 -0.0675870506 0.0307190215 -0.0306375618 -0.0413585605 0.0329041017 -0.0499344767 -0.0583833062 -0.0021505124 0.0021831922 -0.0021452189 -0.0039121129 -0.0033501862 0.0013808121 -0.0012932125 0.0019068993 -0.0018218042 0.0009292323 0.0008944505 -0.0003986954 -0.0018089257 -0.0024197789 0.0034760693 -0.0004425689 0.0021801212 -0.0017094394 -0.0052735633 -0.0080288380 0.0060973334 -0.0025793816 0.0059614093 -0.0023619140 0.0023706663 -0.0001116032 -0.0007253340 -0.0041514739 -0.0067121767 0.0067836802 0.0013565647 0.0023801000 -0.0036312526 0.0110758969 -0.0092562008 -0.0092769940 -0.0018069698 0.0100264699 0.0008811925 -0.0015150997 -0.0004056245 0.0061520142 -0.0062681469 -0.0121111162 -0.0022038428 -0.0083545306 0.0021869435 -0.0211755033 0.0248344729 -0.0094664710 -0.0104358406 -0.0057380907 0.0277255270 0.0010924832 0.0026104085 0.0013173260 0.0069121409 -0.0145407946 -0.0255191511 0.0035118755 -0.0198650507 0.0098536899 -0.0314489619 0.0026422622 -0.0005732424 -0.0001332148 0.0030891267 -0.0015914263 -0.0003577726 0.0140802950 0.0082599852 0.0027343961 -0.0006492152 -0.0015871351 0.0010368510 -0.0002901411 -0.0030672689 0.0018986280 0.0022647837 -0.0028143358 0.0031212902 -0.0023022015 -0.0025423426 -0.0023566248 0.0001643397 0.0019954900 0.0011496641 -0.0053796929 -0.0037787487 -0.0056805984 -0.0008379441 0.0049065100 0.0019303120 0.0033677268 -0.0029428961 -0.0022808343 0.0030063029 0.0015438842 0.0005903918 0.0048608211 -0.0041635902 -0.0050393639 0.0046488876 0.0039504290 0.0004560615 -0.0036390586 0.0147878293 -0.0006808288 -0.0032320305 0.0085086579 -0.0131928886 0.0249718563 -0.0004400807 -0.0143822784 -0.0070369529 0.0036949998 0.0024035843 0.0514736906 -0.0096018457 -0.0230818786 -0.0097347192 -0.0004502584 0.0129740640 0.0107835165 -0.0076789769 -0.0285174726 -0.0215741337 0.0039505499 -0.0020182017 0.0269568064 -0.0201647971 -0.0464335401 -0.0391292547 0.0033808581 0.0070494199 -0.0381061570 0.0602773566 0.0572705543 -0.1889939018 0.0675448230 0.0596114161 0.0133168968 0.1251427651 0.1784737558 0.0278154343 0.0478440158 0.0370824222 0.0530979404 0.1211557818 0.1005466694 -0.1922184236 -0.1888113229 0.1535676283 0.1856851847 0.2811981358 0.4633456032 0.2261159122 0.3450998393 -0.2389187715 0.0063136669 -0.0077780412 -0.0199636109 0.0157572322 -0.0131233165 -0.0148848224 0.0047579484 -0.0143279811 -0.0205395652 -0.0142009746 -0.0449197357 -0.0588505821 -0.0128796252 -0.0106260245 -0.0298257017 0.0717531984 -0.0460543192 -0.0576068451 0.0795156428 -0.0614231478 -0.0584982944 0.0110599617 -0.0021059468 0.0002383135 0.0445244964 -0.0336393226 -0.0279706435 -0.0428576780 0.0307309836 0.0332202494 0.0290404438 0.0922940358 0.0034946034 -0.0632542338 0.0910570346 -0.0160367886 -0.0199159406 0.0383106241 0.0321280887 -0.0298302818 -0.0295969010 -0.0277511733 0.0217660367 -0.0362664251 0.0002433040 -0.2179645452 0.0735060778 -0.1473730142 -0.0247888325 0.0314507923 -0.0618789503 -0.0097735971 0.0131387961 -0.0236131519 -0.0087354547 0.0113147584 0.0040963426 -0.0012143816 0.0015185542 0.0192098577 0.0074167373 -0.0010930312 0.0035408761 0.0187950952 -0.0053231699 0.0140793670 0.0098985664 0.0082068132 0.0239575556 -0.0019349503 0.0080021680 0.0204823730 0.0044365503 0.0006401128 -0.0004768486 0.0183940865 -0.0063627318 0.0133235771 -0.0966022434 0.0038323547 -0.0380337759 0.0302807579 -0.0335682451 0.1206722583 0.0314262040 -0.0430136265 0.2257845149 0.0406677430 0.0052416401 0.0357682594 0.0186263372 -0.0161456123 0.0547586214 0.0127779791 0.0046649096 -0.0456604361 0.0016965464 0.0246669768 -0.0393404167 -0.0154872695 0.0141381225 -0.0275826220 -0.0014803187 -0.0107652885 -0.0319785162 0.0075833121 0.0033757433 -0.0940800444 -0.0068799433 0.0459584359 -0.0579228460 -0.0399200089 0.0261085580 -0.0449760908 -0.0141701668 -0.0234831720 -0.0635036384 0.0382725243 -0.0333148664 0.1325279120 0.0520022396 -0.0069896484 -0.0347544877 0.0587727948 -0.0428206801 -0.0341008817 -0.0003949533 -0.0073042593 0.0385983509 0.0072921996 -0.0533513938 0.0598749448 0.0004616734 -0.0338626444 0.0102287062 0.0192978583 -0.0538171810 -0.0585962837 -0.0038100975 0.0064047028 0.0046892239 -0.0107090124 -0.0058037506 -0.0143820196 0.0086622296 -0.0163421259 -0.0045634932 0.0037169421 0.0069046571 0.0065463446 -0.0135399416 -0.0076570205 -0.0314395216 -0.0032145701 -0.0287516853 -0.0121743903 -0.0486843277 -0.0119410075 -0.0164172783 0.0104104872 -0.0360082458 -0.0410801603 -0.0048956767 0.0002222609 -0.0068602251 -0.0035448171 -0.0269197621 -0.0323081043 0.0040521677 0.0005244373 0.0016604408 0.0184637325 -0.0312527221 0.0049296266 0.0170172997 0.0218400464 0.0164490856 0.0150218413 -0.0120141889 -0.0165832978 0.0182174835 0.0162152711 0.0137182487 -0.0060956535 -0.0152890935 0.0037306600 0.0018433245 -0.0307584458 0.0002412752 0.0046726960 -0.0493348704 -0.0184781619 0.0092928122 0.0054860769 0.0089674956 0.0095388504 0.0036569391 0.0111641411 0.0046352525 -0.0081620748 0.0069582734 0.0010820082 0.0093328927 -0.0111937125 -0.0003197818 0.0070482191 -0.0061987488 -0.0031705385 -0.0056874626 0.0185637975 0.0122535634 -0.0012000881 0.0168059834 0.0071458116 -0.0296194835 0.0142402670 -0.0043428490 0.0033983802 -0.0054260744 -0.0031499511 0.0115842383 -0.0116583694 -0.0160606066 -0.0117512956 0.0339617838 -0.0210038059 0.0038078427 0.0268823050 -0.0113268329 -0.0017675654 -0.0028253999 0.0057100466 -0.0103764484 -0.0057293987 0.0084526992 0.0162090385 0.0078246375 0.0000153557 0.0103554067 0.0382815435 -0.0459047075 0.0030034480 0.0294163135 -0.0270349868 -0.0013636789 -0.0215563643 0.0007070812 -0.0111514866 -0.0109846806 0.0236867269 0.0393680109 -0.0020126488 0.0078551517 0.0243443636 0.0506814774 0.0002835774 -0.0038732763 0.0005577087 -0.0136589672 0.0022723675 0.0028013674 -0.0240434529 -0.0138752442 -0.0110813553 0.0127600171 0.0035327025 0.0025162188 -0.0045837022 -0.0133693521 0.0099091992 -0.0101870193 -0.0200381119 -0.0131978926 -0.0072323687 0.0127449439 0.0480660106 -0.0166643486 -0.0076622672 -0.0323921366 -0.0126695230 0.0317788052 0.0952486510 -0.0252234984 -0.0155344707 -0.0676331205 0.0079264588 0.0113449789 0.0472450456 -0.0078849379 -0.0000712878 -0.0122239857 0.0329883517 0.0273317239 0.0904319914 -0.0056660030 0.0025586682 -0.0203127271 0.0315974266 -0.0245063975 -0.0195390795 0.0006094287 -0.0005967086 0.0153591684 -0.0575187075 0.0169794110 0.0364211217 0.0074648383 -0.0118153182 -0.0011181636 -0.1260608842 0.0493528428 0.0760800686 0.0019268781 -0.0054620906 -0.0033749692 -0.0467148933 0.0236116865 0.0490710512 0.0507446035 -0.0264075199 -0.0148386644 -0.1033167890 0.0533183271 0.0843313810 0.0993953638 -0.0436647774 -0.0444717926 -0.0745628577 0.0326684351 0.0293102875 -0.1790948077 0.0896399598 -0.0097437493 -0.0060830083 0.1546039324 0.0754440942 -0.1432444163 -0.0356894296 -0.0089713865 0.0520106132 0.1041925462 0.0275686370 -0.0224126883 -0.1629195296 -0.0241730506 0.0516288777 0.3063539514 0.2952685027 0.1674568740 0.3185953198 -0.2848508642 0.0067668082 -0.0011192016 -0.0401961618 0.0428437508 -0.0149087212 -0.0098341052 0.0123410063 -0.0191850921 -0.0267381064 -0.0293163044 -0.0638687938 -0.1024851319 -0.0210638249 -0.0036919990 -0.0521984235 0.0779236656 -0.0577205348 -0.0198794237 0.0850453874 -0.0604312961 -0.0631562739 0.0018589576 -0.0044840510 0.0132392814 0.0420868206 -0.0518262248 -0.0154747231 -0.0381547402 0.0400662758 0.0700569280 0.0388089744 0.0949157118 0.0602116482 -0.0822753047 0.1345432739 0.0026214264 0.0062300489 0.0474987229 0.0522158585 -0.0240458076 -0.0568540771 -0.0535731065 0.0892208042 -0.0650008950 0.0049889109 0.2552312045 -0.1195275833 0.2238555891 0.0517174213 -0.0047386269 0.0832479411 0.0125928081 0.0048944771 0.0359061326 -0.0119178253 -0.0262493435 0.0099037553 -0.0133831217 0.0201247480 0.0037699709 -0.0143856992 -0.0017940353 -0.0165896094 -0.0323285602 -0.0184543872 -0.0057943360 -0.0462210106 0.0063840999 -0.0230911894 0.0001158124 0.0237214673 0.0321294448 0.0025897872 -0.0087454129 -0.0316988528 -0.0192367395 -0.0368068373 0.0091590751 0.0984545906 -0.0307202741 0.0699036156 -0.0698462219 0.0405523673 -0.1514527533 -0.0921400945 0.0687468043 -0.2761959929 -0.0365186054 0.0072765378 -0.0535596889 -0.0253324034 0.0060779111 -0.0725056245 0.0044851478 -0.0103245221 0.0508558786 0.0143799253 -0.0158603767 0.0400192685 0.0226800972 -0.0135901964 0.0395649606 0.0069859750 -0.0037697051 0.0340806229 0.0275264661 -0.0183492202 0.1073572720 0.0221283908 -0.0331356398 0.0570118444 0.0418799465 -0.0203311236 0.0733131694 0.0222541908 0.0018834269 0.0710712545 -0.0600761814 0.0226397145 -0.1703381261 -0.0669383163 0.0238475641 0.0093271747 -0.0761194631 0.0193781017 0.0142295913 -0.0003405413 -0.0114604283 0.0263352578 -0.0142282337 0.0641359418 -0.0758989730 0.0009028396 0.0318939279 -0.0283010524 -0.0119097100 0.0447788255 0.0577981348 0.0042107892 -0.0034673527 -0.0041309973 0.0092953282 0.0029973603 0.0138121357 -0.0001877643 0.0064062071 -0.0010682142 -0.0033432312 -0.0061012679 -0.0049947592 0.0179171633 -0.0154937647 0.0222866036 0.0153875091 0.0052351273 -0.0087061124 0.0348566421 -0.0022273815 0.0211804362 -0.0062028423 0.0198128069 0.0404378989 -0.0043743895 0.0030816150 0.0072920686 0.0262397535 0.0264560994 0.0207689063 0.0062365968 -0.0236727806 -0.0143205341 -0.0284062510 0.0232441950 -0.0069272741 -0.0182697735 -0.0219869088 -0.0123055255 -0.0157180421 0.0142330825 0.0219897650 -0.0191670144 -0.0209192508 -0.0149472228 0.0214804524 -0.0134190058 -0.0304714383 0.0127528614 0.0187135567 -0.0164514759 0.0108827374 0.0291146959 -0.0054672038 0.0107133807 0.0175018706 0.0080567605 0.0047100198 -0.0030185801 0.0237146899 0.0041843603 -0.0074083212 0.0067411167 0.0044642785 0.0197062675 -0.0205513870 -0.0066807127 0.0036107941 0.0012801277 -0.0067077160 -0.0036592633 0.0277519268 0.0049279209 -0.0262719508 0.0481082392 0.0043033109 -0.0310720089 0.0172815951 -0.0016087359 0.0053733327 -0.0123545621 -0.0198016913 -0.0045613765 0.0043888243 -0.0245350534 -0.0149663276 0.0501371748 -0.0174782454 0.0059142287 0.0180425163 -0.0117391575 0.0053390494 -0.0018220615 0.0097974256 -0.0170264432 -0.0002424757 0.0075074454 0.0068303287 0.0059852571 -0.0061620181 0.0176749311 0.0216173235 -0.0343323675 0.0081491197 0.0186546923 -0.0234553443 0.0124973576 -0.0142368016 0.0054641537 -0.0094702491 -0.0070492751 0.0181449146 0.0200397920 0.0001898801 -0.0068900092 0.0410461580 0.0273091989 0.0085420193 -0.0082544704 0.0002789825 -0.0151466387 -0.0013323436 0.0036284830 -0.0189163591 -0.0087540096 -0.0089425402 0.0128297273 0.0093098907 0.0004754170 -0.0066565196 -0.0270307523 0.0202367271 -0.0144532661 -0.0425123457 -0.0277135049 -0.0125242996 0.0194021236 0.0835233008 -0.0262142056 -0.0124310463 -0.0604357573 -0.0253147142 0.0523892080 0.1649927992 -0.0437609663 -0.0237143400 -0.1265586321 0.0218894727 0.0166908237 0.0811677483 -0.0052530984 0.0037685545 -0.0163865819 0.0698733422 0.0452966622 0.1594133002 0.0022272781 0.0144763109 -0.0221988511 0.0435801960 -0.0102830899 -0.0368604452 -0.0079960263 0.0130286146 -0.0079570202 -0.0503624215 0.0295213530 0.0245276289 -0.0060351088 -0.0150136230 -0.0071405807 -0.1143145439 0.0651737797 0.0725274856 -0.0181745665 -0.0165245300 0.0127009905 -0.0655263445 0.0216808682 0.0170092691 0.0318234922 -0.0379185850 -0.0395208264 -0.1313127427 0.0483515675 0.0422883174 0.0753598237 -0.0661394502 -0.0692431678 0.0650676631 -0.0098143724 -0.0156591682 0.1267602940 -0.0664512101 0.0254564980 0.0099903564 -0.1164506275 -0.0258079623 0.1557575251 0.0566972893 0.0175734962 -0.0380852677 -0.0661876258 0.0049271948 -0.0508065935 0.0985390743 0.0786607736 0.0141631736 -0.2232439475 -0.1432486812 -0.0976633618 -0.2088775836 0.2088412826 -0.0000476329 -0.0017334566 -0.0013840764 -0.0011502635 0.0017904480 0.0050722217 0.0000690928 0.0004966970 0.0019033473 -0.0003526780 -0.0008036434 -0.0022068792 -0.0013118048 -0.0009545102 0.0002676650 0.0009514208 -0.0002516511 0.0024217672 0.0018253183 -0.0002152336 -0.0004856617 -0.0000368339 -0.0009723479 0.0002085316 -0.0003463120 -0.0005595512 0.0009474414 0.0014275911 -0.0009260382 0.0008260404 0.0015647724 0.0009575277 0.0037121097 -0.0013709368 0.0005257619 0.0039262385 0.0010806119 0.0002081370 0.0004981646 0.0001876621 -0.0010617707 -0.0008028676 0.0035655870 -0.0049450737 -0.0011141133 -0.0215718408 0.0159065791 -0.0379729740 0.0119697756 -0.0048893738 0.0160886270 0.0055892514 -0.0022295165 0.0068942917 0.0018736762 -0.0044735372 0.0064811950 -0.0050924262 0.0035964183 -0.0076440858 0.0008214660 -0.0009163375 -0.0011274172 -0.0072614914 0.0003024342 -0.0082101312 -0.0033534345 -0.0019637032 0.0002433780 -0.0094007867 0.0084113725 -0.0136907780 0.0020100341 -0.0013859722 -0.0030569639 -0.0141609829 0.0019580798 -0.0193970012 0.0100135109 -0.0010036814 0.0065240148 0.0055016167 0.0047160952 0.0017030741 -0.0008049745 0.0094619553 -0.0025559180 -0.0013388471 0.0044041224 -0.0080794321 0.0028969544 0.0002835457 0.0040343315 -0.0769642267 0.0261887660 -0.1917177904 0.0782206489 -0.0213738590 0.1804551359 -0.0782105777 0.0303713195 -0.1842350528 0.0784159631 -0.0261228815 0.1759580057 -0.1695910910 0.0575107837 -0.4150928892 0.1965048944 -0.0759021295 0.4376894837 -0.1558381631 0.0505076892 -0.3663838954 0.1718545771 -0.0580337355 0.4012889237 0.0071700744 -0.0061253708 0.0287607075 -0.0074723603 -0.0001799567 0.0033654369 -0.0082077115 0.0027052592 0.0018278024 -0.0003081864 0.0003566543 -0.0003018929 0.0009180825 -0.0017297421 0.0022464758 -0.0019102540 0.0008648504 0.0020552660 0.0013644708 -0.0013650645 -0.0027151978 0.0009991028 0.0006784708 -0.0001968493 -0.0004383603 0.0009573048 0.0009658171 -0.0127761797 -0.0030398306 -0.0039917807 0.0002683773 -0.0001450433 0.0001783266 0.0013388713 0.0029310875 0.0073458121 -0.0042641927 0.0046486145 0.0046430421 -0.0016812208 -0.0003299148 0.0014710228 0.0003364002 -0.0023720773 0.0026572871 -0.0047650895 0.0032078240 0.0006470239 -0.0488160266 -0.0295695689 -0.0140390342 -0.0258754959 0.0474976998 0.0061220169 0.0273214883 -0.0213095397 0.0003650829 -0.0005729707 -0.0002939984 0.0029842374 -0.0001386975 0.0002569372 0.0027003335 0.0003791784 -0.0044347577 -0.0016706296 -0.0038730309 0.0038155975 0.0037496567 -0.0060707265 0.0020098653 0.0003253047 -0.0081094729 0.0096994137 0.0082502497 0.0004726679 -0.0004264747 -0.0024209105 0.0129127183 0.0239411021 -0.0239405320 -0.0083030579 -0.0233576501 0.0203109755 0.0005098803 0.0021005776 -0.0008112858 0.0093231788 0.0252413687 -0.0212997721 -0.0121917473 -0.0247011687 0.0197624022 0.0247895405 0.0483542612 -0.0473902329 -0.0213125876 -0.0562240428 0.0498647608 0.0001068985 0.0025247915 0.0026557522 0.0222918095 0.0553923567 -0.0462412843 -0.0245830558 -0.0523254645 0.0432555291 0.0023074135 -0.0045191511 0.0010998044 -0.0020368609 0.0045723964 -0.0013913451 -0.0002519876 0.0007822206 -0.0002844662 0.0023954736 -0.0048647972 0.0012144484 -0.0022025582 0.0042450066 -0.0015304077 0.0051788247 -0.0101019236 0.0028784355 -0.0040701413 0.0090205433 -0.0026423266 -0.0000487643 0.0004717100 0.0000944878 0.0056566013 -0.0114077953 0.0031215631 -0.0046270828 0.0088166481 -0.0028153839 -0.0040213662 0.0000833762 0.0028146194 0.0028629606 0.0000183238 0.0010843531 0.0002245162 0.0002466431 0.0001891771 -0.0000713964 -0.0001905181 0.0001115104 0.0008413935 0.0014206037 0.0005120515 -0.0005696197 0.0004174039 -0.0020347672 0.0015241276 0.0007507116 0.0003479960 0.0008023911 -0.0008531390 -0.0017036532 0.0023036804 0.0008173977 0.0005499765 0.0008377818 -0.0024051088 -0.0036293402 -0.0003933916 0.0010162496 0.0003512444 0.0001364963 0.0002357249 0.0011105049 -0.0006037398 0.0014597075 0.0014351070 -0.0001250016 0.0000460593 0.0032202194 0.0005815940 0.0004454133 -0.0007582366 -0.0008267352 0.0003188231 -0.0012631161 -0.0009024052 0.0011479635 -0.0005011618 -0.0006581464 -0.0002420899 -0.0011424185 -0.0018700571 0.0015539099 -0.0000283056 -0.0005266345 -0.0009927886 -0.0001234302 -0.0021602450 0.0001043918 -0.0013739151 -0.0009025246 -0.0007780906 -0.0023026006 -0.0032801690 0.0005086291 -0.0010646120 -0.0005483919 -0.0014495704 -0.0026595254 0.0076184600 -0.0075641144 0.0015708089 0.0052225943 -0.0001008348 -0.0041533339 0.0070959709 -0.0099044777 0.0120207377 0.0184928508 -0.0149444358 -0.0056853434 -0.0022436638 -0.0056623488 -0.0038956095 0.0049680335 0.0005092845 -0.0065751546 -0.0048072614 -0.0115598057 -0.0145207773 -0.0111832021 -0.0112113260 0.0054125109 -0.0005906256 0.0170730866 0.0106137821 0.0156266097 -0.0176398888 -0.0423913954 0.0022956934 -0.0067991795 -0.0162801861 -0.0049908459 -0.0007095852 -0.0011395272 0.0010345733 0.0134260136 0.0023350692 0.0026115913 -0.0113813627 -0.0083615400 -0.0043810961 -0.0035335001 -0.0059835764 -0.0002969776 0.0069062758 0.0064661224 0.0089997014 -0.0108108121 -0.0030102355 -0.0081120763 0.0164930413 0.0190331549 -0.0116926715 -0.0125665148 -0.0033086900 -0.0085060177 0.0207884011 -0.0193127343 0.0011636525 0.0044042873 0.0014413662 0.0026818280 -0.0058914293 -0.0052572071 -0.0049775224 0.0199520081 0.0060859981 -0.0081879666 0.0121351160 -0.0216153833 -0.0015198397 -0.0039458570 -0.0011729906 0.0018171613 -0.0021350654 -0.0006744368 0.0023179350 0.0017091537 -0.0003424304 0.0020351070 -0.0017738379 -0.0045506104 0.0023590640 0.0013534427 0.0018634305 -0.0001232020 0.0038551556 -0.0028240854 0.0031243205 -0.0037816372 0.0001129574 -0.0004991432 -0.0004495295 -0.0089277304 0.0012919477 0.0017107523 0.0042252535 -0.0032373660 0.0054185839 -0.0076173594 0.0037263473 0.0058090181 -0.0029911774 0.0089052805 0.0008158795 0.0050569287 0.0128477123 -0.0026228808 0.0066637879 -0.0016112248 -0.0016563714 0.0020044058 0.0017364443 0.0014582813 0.0032081980 -0.0170134640 0.0049636724 -0.0332893693 0.0105708104 -0.0059596597 0.0308172505 -0.0143751339 0.0044315832 -0.0337358494 0.0120826013 -0.0020849138 0.0299773918 -0.0362046564 0.0120435203 -0.0730943764 0.0299763306 -0.0154235012 0.0728260401 -0.0261560742 0.0066125978 -0.0682545787 0.0275868204 -0.0055628625 0.0675502109 0.0050711590 0.0007525027 0.0101121092 -0.0036215070 -0.0028816847 0.0040193199 -0.0066014605 0.0027619174 0.0022113444 0.0035204248 -0.0069123953 0.0017018812 0.0016117677 -0.0017486542 0.0016655023 0.0002737736 -0.0004108450 0.0011678924 0.0043851639 -0.0060170793 -0.0053071654 -0.0024917412 -0.0009332338 -0.0003635699 -0.0014260083 0.0007924455 0.0003929954 -0.0030418614 0.0003697866 0.0017838740 -0.0000527072 -0.0008129474 -0.0010509044 0.0025056747 0.0055583483 0.0021754702 -0.0059220922 0.0041228245 0.0053141330 -0.0031492270 -0.0007705913 0.0011990421 -0.0008248104 0.0001218791 -0.0007690179 -0.0016440990 0.0022296313 0.0013939961 -0.0057424609 -0.0020672222 -0.0010861400 -0.0039328080 0.0046082605 0.0075974961 0.0038133736 0.0010661955 -0.0007148127 0.0014191601 0.0008679723 -0.0001197689 0.0015188655 -0.0035140117 -0.0036289652 0.0012999877 0.0010104322 0.0000558676 -0.0089086328 0.0070322964 0.0081943347 -0.0079024972 -0.0034394055 0.0012957992 -0.0095600812 0.0059851479 0.0087458827 -0.0076983459 0.0059513327 0.0155062904 -0.0799248351 -0.1445563977 0.1417712509 0.0456625977 0.1370577136 -0.1290298384 -0.0018185437 -0.0074881279 -0.0076480689 -0.0630935412 -0.1489892538 0.1214451121 0.0617679829 0.1432242229 -0.1110478986 -0.1483408216 -0.2971204994 0.2897924662 0.1159285109 0.3252098429 -0.2937400782 0.0063854322 -0.0100725773 -0.0110090894 -0.1495032528 -0.3313630372 0.2690692969 0.1292417633 0.3005323331 -0.2418517912 -0.0165355960 0.0328460350 -0.0085806756 0.0106367499 -0.0246006642 0.0087948523 0.0049633321 -0.0126759423 0.0050276350 -0.0165121992 0.0304394406 -0.0075407707 0.0089575975 -0.0198843019 0.0060767721 -0.0356746555 0.0735615670 -0.0217019923 0.0207712217 -0.0457223986 0.0152455883 0.0028935512 -0.0055260101 0.0002834090 -0.0388548314 0.0733846330 -0.0198281659 0.0186129482 -0.0395334586 0.0108320129 0.0339477816 -0.0033463310 -0.0086698499 -0.0112905599 -0.0045749068 0.0026535210 -0.0025363999 -0.0004619889 -0.0029440596 0.0027479555 0.0049414204 -0.0015748283 -0.0031311706 -0.0141479160 -0.0011528135 0.0032683665 -0.0102414729 0.0076748353 -0.0055996714 -0.0032363891 0.0107908819 -0.0009833825 0.0040625727 0.0000640835 -0.0125112160 0.0022901996 0.0240249936 -0.0044258035 0.0140189404 0.0027600585 0.0118219411 -0.0025452028 0.0087503148 0.0058665201 -0.0003804363 -0.0108301624 0.0228070669 -0.0005529140 0.0155925472 0.0080377772 0.0015616714 -0.0230051465 0.0035616221 0.0045321779 -0.0044852280 0.0022179145 0.0080785298 0.0003321245 0.0059084499 0.0007024085 0.0038012119 -0.0000309885 -0.0017188682 0.0081593884 0.0123172851 0.0023895765 0.0092365947 -0.0031882619 -0.0007056315 0.0111743411 0.0027564480 0.0016219719 -0.0008260275 0.0034208298 -0.0036866220 0.0055800358 0.0010128594 -0.0017436670 -0.0079423078 0.0038784602 -0.0081425524 0.0043172445 0.0012895380 -0.0007406058 0.0008176247 -0.0005286742 0.0006517215 -0.0001629986 0.0025144748 0.0016873788 0.0021578395 0.0011423970 -0.0021658491 -0.0002292564 0.0016546322 -0.0006221739 -0.0028308186 0.0055275686 -0.0014831770 -0.0058806819 -0.0019403505 0.0010911242 -0.0045801062 0.0000763425 -0.0003625402 -0.0029235160 -0.0028767856 -0.0143049855 -0.0071358390 -0.0269189900 0.0117772036 0.0070837780 -0.0122348782 0.0040741606 -0.0104746101 0.0098372359 -0.0157096370 -0.0270847641 0.0076586562 -0.0239466831 -0.0272932361 -0.0092761529 0.0159407123 0.0103915620 0.0145826716 -0.0059329739 -0.0024007962 0.0054986978 -0.0141486057 -0.0086945810 -0.0216708388 0.0212902669 0.0114840193 0.0240471390 -0.0349992399 -0.0348648793 0.0126770374 0.0223590847 -0.0014278625 0.0209831407 -0.0275279092 0.0091516045 -0.0027833935 0.0029453510 -0.0021351123 0.0003491043 0.0083419375 0.0045296570 -0.0046798806 -0.0024490796 -0.0036131154 -0.0182633030 0.0101801806 -0.0179013718 0.0000314995 -0.0010685914 -0.0017214961 -0.0007344138 -0.0003168014 -0.0039237280 0.0030984716 0.0008899059 0.0030402578 -0.0006256158 -0.0006556640 -0.0031645897 -0.0003108320 0.0021252918 -0.0017995794 0.0032178885 0.0012578588 0.0021454853 0.0033192105 -0.0014583604 0.0025797547 -0.0028954492 -0.0000041722 -0.0071576907 -0.0037564333 0.0037272978 -0.0031985801 0.0014306097 0.0024889908 -0.0003821253 -0.0061313672 0.0033875935 -0.0048449187 0.0040014112 -0.0014110473 0.0079472204 0.0068037233 -0.0044411453 0.0168810812 0.0016049424 -0.0005292002 0.0032986733 0.0017104987 -0.0007458223 0.0033892670 -0.0006549703 0.0001753581 -0.0025866243 -0.0003605533 0.0002035870 -0.0014545480 -0.0009507701 0.0002850119 -0.0027436308 -0.0002469150 0.0000093923 -0.0015124672 -0.0019105004 0.0006212732 -0.0057067481 -0.0004135132 0.0004109893 -0.0016317036 -0.0024712980 0.0009196928 -0.0046870907 -0.0008739484 0.0002427001 -0.0030414834 0.0037354189 -0.0014584684 0.0083368273 0.0029698795 -0.0016650104 0.0006136117 0.0020939955 -0.0010253093 -0.0046138047 -0.0110394024 0.0190367769 -0.0029599745 0.0006458404 -0.0019959522 0.0042694269 0.0007034887 -0.0002696112 0.0021714654 -0.0045823070 0.0070161897 0.0033167042 0.0022541543 0.0014832276 -0.0002332439 0.0027406450 0.0006358051 -0.0011656097 0.0004493202 0.0016123266 -0.0005481221 0.0000719362 0.0012980973 0.0011457403 -0.0027402701 -0.0030778128 -0.0023971876 0.0047615077 -0.0025843123 -0.0033374792 0.0129670368 0.0012029208 0.0000440088 -0.0017760954 0.0033088334 0.0095870670 -0.0014513630 -0.0032116191 -0.0059600264 -0.0019306796 -0.0003354109 -0.0016558966 -0.0000349909 0.0044716609 0.0010748598 0.0025291443 0.0001941965 -0.0000712035 -0.0012819692 -0.0001216481 0.0005096911 -0.0010706413 0.0031866952 0.0040838868 -0.0015072334 -0.0002102748 0.0001390383 0.0075344460 -0.0043172540 -0.0047570429 0.0064776705 0.0033068451 0.0001113721 0.0078732343 -0.0055310859 -0.0062381232 0.0047195918 -0.0004083000 0.0178931364 0.0025050618 -0.0127190179 0.0274783261 0.0191867694 0.0245047693 -0.0247897066 -0.0055184840 -0.0184304328 0.0077151964 -0.0104743840 -0.0244282008 0.0179999626 0.0194385178 0.0406100871 -0.0195790692 0.0033189513 -0.0255717007 0.0421962388 0.0431169706 0.0613566898 -0.0682949035 -0.0059711830 -0.0078982247 0.0001654201 -0.0268595355 -0.0460011555 0.0332124634 0.0318382956 0.0891094170 -0.0513851851 0.0927721177 -0.1809264089 0.0524261687 -0.0765926736 0.1752958460 -0.0549498388 -0.0118919484 0.0336937894 -0.0150260860 0.0934138606 -0.1866194901 0.0475725527 -0.0834677117 0.1596179102 -0.0475441621 0.1981170501 -0.4014032882 0.1233487784 -0.1580532823 0.3481072483 -0.1061210883 -0.0049090114 0.0145577450 -0.0022312847 0.2172543481 -0.4299217767 0.1175224581 -0.1730903218 0.3317822556 -0.0941638665 0.0049140827 0.0028901998 -0.0042306016 -0.0128410412 0.0065578158 -0.0001872061 0.0040826541 0.0047705071 0.0041982474 -0.0010788906 -0.0144581101 0.0069895364 -0.0066685360 0.0152673683 -0.0096628608 -0.0046807110 0.0117672668 -0.0144171877 0.0021545463 0.0128567493 0.0160388953 -0.0123140287 -0.0141853127 -0.0061563246 0.0216355101 0.0200658483 0.0355770883 -0.0091846308 -0.0274456214 -0.0139046388 -0.0143411351 0.0108099549 0.0213069394 -0.0163126955 -0.0108590891 0.0007412548 -0.0257897581 0.0190439356 0.0401133169 -0.0205288641 -0.0169416210 -0.0005648482 -0.0014466713 -0.0148817812 0.0059179438 0.0021744105 -0.0175358727 0.0080236119 -0.0153215853 -0.0053590900 0.0040336388 0.0069825614 0.0011823410 -0.0071325731 -0.0363572579 -0.0028430507 0.0016439239 0.0093881561 0.0057859797 -0.0182427564 -0.0020928600 0.0024415994 0.0194059195 0.0089320457 0.0058898410 0.0022885510 -0.0074822994 0.0137562089 0.0393465095 0.0120780946 0.0146020781 0.0027315835 0.0004431577 -0.0038043380 -0.0023242077 0.0073019932 -0.0013559361 -0.0046779048 -0.0017178085 -0.0068334003 -0.0069071212 -0.0033409631 -0.0061830725 -0.0033761905 -0.0051803530 -0.0072780180 0.0000160913 0.0043767237 0.0094198618 -0.0006422848 -0.0087227460 -0.0164610897 -0.0162641406 -0.0182603263 -0.0141084842 0.0126429002 0.0057183354 0.0857212088 0.0730897948 0.1037531008 -0.0915570270 -0.1432495080 0.0433138029 -0.0259112642 0.0168764800 -0.0376995137 0.0709596072 0.1293540982 -0.0295557024 0.1245016344 0.1644421756 0.0615433777 -0.1087489638 -0.0866629588 -0.0197631887 -0.0196357694 -0.0515694697 0.0032862706 0.0721912792 0.0540550444 0.1026739986 -0.0925839587 -0.0258411371 -0.0624642687 0.1741942904 0.1931912469 -0.1089590807 -0.1645224292 -0.0129649621 -0.0989216387 0.1235546212 -0.0721324561 -0.0092817925 -0.0005272112 -0.0088546887 0.0222891339 -0.0375283113 0.0063474233 0.0050036652 0.0381645831 -0.0009319994 -0.0082163493 0.0059211447 -0.0086530597 -0.0029221953 -0.0028450157 -0.0024493867 -0.0006113138 -0.0018272514 -0.0019723219 0.0027332977 0.0003742155 0.0010317497 0.0007912589 -0.0018918501 -0.0026062265 0.0000678640 0.0004893119 0.0000856180 0.0007738063 0.0020229947 -0.0014174478 0.0035995263 -0.0029632812 0.0018744923 -0.0017666234 -0.0013873244 -0.0075193967 -0.0006374562 0.0008143897 0.0025278511 -0.0018590826 0.0042630106 -0.0051056840 -0.0018496023 0.0023781232 -0.0031342755 0.0032591786 -0.0004376858 0.0037594156 0.0059244220 -0.0029864666 0.0087511807 0.0004055949 -0.0006169303 0.0018207431 0.0004775491 0.0001138365 0.0021167336 0.0005938925 -0.0005892459 0.0025797865 -0.0027502408 0.0005736340 -0.0037405508 0.0005753348 0.0000318417 0.0021679790 -0.0018433578 0.0006903084 -0.0039342843 0.0014427061 -0.0007843293 0.0056097695 -0.0040567192 0.0024602795 -0.0066124064 0.0042800764 -0.0019095246 0.0035136430 -0.0038711468 0.0013757402 -0.0087863974 0.0012413960 -0.0004209440 0.0048283663 -0.0011195599 -0.0001663679 0.0019392642 -0.0043387659 0.0097391970 -0.0097652855 0.0430934510 -0.0435752229 0.0534814245 0.0007167184 -0.0012780307 0.0026915546 0.0007368017 0.0001848312 0.0014997929 -0.0025154878 0.0048311563 0.0022512168 0.0010551384 -0.0001962230 0.0000901003 0.0015063381 -0.0006217892 0.0012081635 0.0051108237 -0.0011032291 0.0005857140 0.0000552327 0.0000139738 0.0000831867 -0.0009748078 -0.0006982668 -0.0009579550 0.0019383993 -0.0004765272 -0.0009442369 0.0029314429 -0.0021961925 0.0021183391 0.0004040137 0.0022569484 0.0013304414 0.0032872191 0.0003537270 0.0027954138 0.0048429852 -0.0012264208 -0.0040407518 0.0048733514 -0.0030709191 0.0010589782 0.0056184396 -0.0027289822 0.0017851580 -0.0014006138 -0.0018667231 -0.0019650402 -0.0012051773 0.0024121968 0.0011026665 -0.0007403518 0.0007728727 0.0002451092 0.0029583363 -0.0010300156 -0.0013365648 0.0026053489 0.0015598657 0.0004041702 0.0031742570 -0.0018970082 -0.0021049546 -0.0381525450 0.0106257472 -0.0748558537 -0.0750418805 -0.0376601065 -0.0374150565 -0.0639528265 -0.0128416160 0.0169875830 0.0178691361 0.0639421254 -0.0288026337 -0.0078808705 0.0045081486 0.0089015871 -0.0513557518 -0.0674364988 -0.0048711092 -0.1233010806 -0.0783149045 -0.0078492431 -0.1251028478 -0.0363666932 0.0957949319 0.0391446802 0.0231260937 -0.0014617282 0.0012678328 -0.0289268805 0.0445947488 -0.0515902519 -0.1670826131 0.0347806786 0.0177675177 -0.0069191775 0.0425169521 -0.0364467942 0.1069170131 -0.0166108870 0.0358564099 -0.0780076132 0.0228950008 0.0246111753 -0.0216998187 0.0320751051 -0.0612537826 0.1277304710 0.0102819009 -0.0003108743 -0.0116240000 0.0459023974 -0.1035455602 0.2497158659 -0.0579393630 0.0133129106 -0.0487737763 -0.0183931596 0.0502946243 -0.0192810490 0.0278553575 -0.1438463263 0.2887410216 -0.0303836594 0.0096630543 -0.0116560340 0.0137523850 0.0681917686 -0.0342605502 -0.0010428423 -0.0628179185 -0.0203018135 -0.0401031575 0.0260566820 0.0187412295 -0.0128435551 0.0256800793 -0.0636250091 0.0484918997 0.0269337888 -0.0356499079 0.0967446538 -0.0121881639 -0.0659413915 -0.0796329323 0.0565595652 0.0634206582 0.0479247457 -0.0964162307 -0.1066838578 -0.1878814662 0.0440549207 0.1286288631 0.0945729761 0.0612174339 -0.0513419645 -0.1002153538 0.0712764910 0.0373987349 -0.0128395934 0.1018060359 -0.0976799931 -0.2111098027 0.0837543709 0.0521576896 -0.0362355802 0.0311893032 0.0541523173 -0.0561856071 0.0046144841 0.0911252407 -0.0270983504 0.0250239991 0.0353546735 0.0138140309 -0.0261915314 -0.0265868645 0.0370668664 0.0715942608 0.0581487595 0.0752838283 -0.0450403948 -0.0397824441 0.0864272574 -0.0295303268 0.0116997600 -0.0438915058 -0.0000656386 -0.0556587405 -0.0082016081 -0.0725392243 -0.0144297593 -0.1119376909 0.0150233819 -0.1065671134 -0.0283638134 0.0006884022 -0.0026883626 -0.0016032067 0.0063735863 -0.0016688710 -0.0027374235 -0.0012014348 -0.0053227161 -0.0056173729 -0.0019643653 -0.0035146492 -0.0017216559 -0.0039045599 -0.0066441524 -0.0015749437 0.0054433784 0.0123377584 -0.0011161572 -0.0080129775 -0.0158700471 -0.0187686446 -0.0124543975 -0.0165136515 0.0138382797 -0.1021679698 0.0769179606 -0.0730768913 0.0772560159 0.0263130182 0.1109676062 -0.0304616494 0.0002057401 0.0304754576 0.0069453432 0.0476849252 -0.0340382399 -0.0141195065 0.0432783600 -0.0909853215 0.0421676777 0.0710239563 -0.0095583672 -0.0356067643 0.0767355620 0.0182237605 -0.0091708906 -0.0092844723 0.0467968029 0.0767443634 0.1061480466 0.0349518992 -0.0897041457 -0.0287432156 -0.0192930009 0.0626081693 0.0320270211 -0.0266440039 0.0466302408 -0.0419031559 0.0171309944 0.0186647888 -0.0307756485 0.0271901380 -0.0645267808 0.0307855858 -0.0351886400 -0.0134778556 -0.0157193129 0.0405983359 0.0024053453 -0.0092205807 0.0095784882 0.0064382127 0.0035818675 0.0061558743 -0.0000147922 0.0030067362 0.0013629971 -0.0042822354 -0.0013294985 -0.0005876678 -0.0028470391 0.0030416824 0.0055912292 -0.0018611620 -0.0007006844 -0.0031454943 0.0024436182 -0.0063202974 0.0067636686 -0.0064850125 0.0067440407 -0.0032245836 0.0016650713 0.0029226569 0.0143005132 -0.0022793462 -0.0002923982 -0.0087822817 0.0096761554 -0.0121038958 0.0171288448 -0.0045004340 -0.0055525073 0.0032500207 -0.0049612874 -0.0014499739 0.0004629656 -0.0098021698 0.0024300092 -0.0000568974 0.0018895886 0.0015002479 -0.0000348735 -0.0018164325 -0.0018164713 0.0007091621 0.0022080541 -0.0011775692 -0.0014953391 0.0009738443 0.0024076996 0.0001729841 -0.0012019660 0.0015066636 0.0004517582 0.0000709293 -0.0032002292 -0.0004243041 0.0043054170 -0.0025230390 -0.0032372371 0.0011477078 0.0042452039 0.0005552111 0.0018340388 0.0001875261 -0.0002766800 0.0000248622 -0.0054211488 -0.0006450213 -0.0044241005 -0.0035069962 0.0019657040 0.0081830582 0.0008743999 -0.0072018800 0.0175263053 -0.0214946651 0.0425543470 0.1202228492 0.1224479625 0.0474236026 -0.0000254165 0.0026480726 -0.0031932170 0.0005937618 0.0002324995 -0.0025259626 0.0036914898 -0.0035217970 -0.0021631985 -0.0026881929 -0.0009962222 0.0007230625 0.0003288710 0.0004966182 0.0007219735 -0.0030431877 -0.0000376833 0.0000337650 -0.0001918728 0.0001045325 0.0001608560 0.0025452428 0.0008360921 0.0000588151 -0.0017143227 -0.0003116192 0.0004393058 -0.0007980121 0.0004279650 0.0005620411 -0.0003978073 -0.0013308021 0.0050835362 -0.0029554377 -0.0021934196 -0.0027957566 -0.0023486442 0.0009167733 0.0025075645 -0.0017112791 -0.0035573454 -0.0003034652 -0.0016255237 -0.0005609370 -0.0000067350 0.0006231115 0.0010728974 0.0007945580 0.0007897488 -0.0015448181 -0.0017051657 0.0008542782 0.0015623327 0.0010503362 -0.0033752680 0.0010526452 0.0016568499 -0.0026435505 -0.0035783695 -0.0013793644 -0.0035927350 0.0014119138 0.0022442227 -0.1265559765 0.1251189224 -0.0328074964 -0.1271121841 0.0587522221 -0.0205579664 -0.1318818321 -0.0071136823 0.0037719097 -0.0094678706 0.0073298668 -0.0047859111 -0.1187965554 0.0473333937 0.0579687643 -0.1264395474 0.0819818416 0.0406085066 -0.0966105189 0.0409328669 0.0101410019 -0.1923332285 -0.0234982941 0.0824341139 0.1121938360 -0.0351382887 -0.0170735919 -0.2182304054 0.0042457786 0.0577978207 -0.1247373099 0.0402229462 0.0547217704 0.1358388969 0.0533772093 0.0250287363 0.1301386039 0.0307154355 0.0076371072 0.0015136304 0.0316950706 -0.0057951055 0.1045453272 0.0570219064 0.0791846680 0.1220642335 0.0687847453 0.0813749283 0.1120145000 0.0150293351 0.0412423871 0.1798995249 0.0265666568 0.0727954049 -0.1059929856 -0.0416984273 -0.0377187253 0.1987083840 0.0456637859 0.0692730463 0.1292282399 0.0186198893 0.0732940888 0.1726739596 -0.0399404283 -0.0003371510 0.1465827463 -0.0593926357 -0.0341440010 -0.1474671741 -0.0741614391 -0.0236769806 -0.1399906548 -0.0887067270 -0.0732020150 -0.0316056024 -0.0580311168 0.0112919966 0.0497425725 -0.0695989487 -0.0296547331 -0.0273142310 -0.0430851056 0.0575823151 -0.0030388767 -0.0223703469 -0.0205091627 -0.0299427241 -0.0207445107 0.1124357842 -0.0386383079 0.0368170592 -0.0509761700 0.1008388018 -0.0408836035 0.0284926268 0.0886294657 -0.0233186717 -0.0064146809 0.1303651455 -0.0214495572 0.0867533138 0.1213276830 0.0252780668 -0.0012554894 -0.0733027400 -0.0674030762 -0.0010096077 0.0007679280 -0.0709408833 0.0450594331 -0.0615859701 -0.0834921285 -0.0913901070 -0.0686316784 -0.0383143759 -0.0924854920 -0.0606613590 -0.1096694266 -0.1387615456 -0.0645722546 -0.0125560740 -0.1428059477 0.0237890458 -0.0741691233 0.0314905329 -0.0442552211 0.0056152863 -0.0050907326 0.0620290179 -0.0759810906 0.0419925378 -0.0359616279 0.1036935380 0.0123551391 0.0011736146 0.0032492249 0.0000861125 -0.0015067391 0.0014484464 0.0017115928 0.0017179924 0.0036035351 0.0025757447 0.0042731771 0.0048356381 0.0006150511 0.0022542013 0.0047091139 0.0015452887 -0.0120392974 -0.0171776015 0.0032975966 0.0112087593 0.0116386532 0.0217357113 0.0082533817 0.0169835843 -0.0164512805 -0.0073583168 0.0215501628 -0.0092385370 0.0181618700 0.0105739493 -0.0025941794 -0.0008218388 0.0112468699 -0.0034844962 0.0015029107 -0.0051663546 -0.0153718202 0.0121801585 0.0185263061 -0.0028200623 0.0098713671 -0.0203569449 0.0179217468 -0.0002137756 -0.0016980032 0.0060325075 -0.0049267866 -0.0105774101 0.0044838385 -0.0083984917 -0.0315363990 0.0014482120 0.0094701091 -0.0022759911 0.0239964022 0.0228708871 -0.0004158078 0.0166129059 0.0219496831 0.0066972771 0.0179333037 0.0286164267 0.0086887884 0.0125134113 -0.0156934689 0.0087698956 -0.0459582866 -0.0371519061 -0.0319344832 0.0120541088 0.1069712960 0.0074840303 -0.0442098283 -0.0094534024 -0.0123850641 -0.0078894790 -0.0020051248 -0.0040100487 -0.0127883550 -0.0066985625 -0.0007359733 -0.0218865109 0.0228214277 -0.0138714396 0.0042281177 -0.0021580879 0.0029044154 -0.0067493761 0.0038490677 -0.0079372560 0.0180256993 -0.0129516990 -0.0157728853 -0.0232568284 0.0461894857 -0.0241115013 0.0453724059 0.0014959205 0.0008707432 -0.0022247579 0.0287263960 -0.0282458407 0.0528321460 0.0588122972 0.0404680853 -0.0280133624 0.0706213264 0.0185588919 -0.0126761297 0.1168338171 -0.0175517601 -0.0295172337 -0.0247322482 -0.0233036833 0.0120080277 0.0064162464 0.0197605315 0.0081626534 -0.0327847190 0.0002840433 0.0181950016 -0.0358063263 -0.0254505607 -0.0017655453 -0.0002344847 -0.0103189414 -0.0008586514 -0.0119856251 0.0260422660 0.0005583566 -0.0591312435 0.0159267516 0.0297403581 -0.0408247702 -0.0409872883 -0.0136405397 0.0248123417 -0.0268253676 -0.0143115868 -0.0167825248 0.0484902310 -0.0089056828 0.0234626769 0.0280515528 0.0091559448 -0.0612052187 -0.0017581022 0.0333030260 -0.0603618141 0.0218963126 0.0667050781 -0.0204985060 -0.0255292524 -0.0067606718 0.0848193406 0.0141791255 -0.0397268235 0.0358233398 -0.0096203705 -0.0116625516 0.1361560818 -0.1909979244 -0.0998743267 -0.1523829118 -0.0501762911 0.0044087655 -0.0720402370 0.0562721890 -0.0210059184 -0.0165407858 -0.0353061395 0.0560220113 -0.0133873608 -0.0406649489 -0.0357672546 0.1111573624 0.1448547525 0.0391665176 -0.1446836765 0.1069307928 0.1282991072 -0.0391298364 0.0721802327 -0.0251743103 -0.0970218219 0.1350952308 -0.0511667470 0.0070666212 0.0167920177 -0.0128299588 0.0593310755 0.0131891185 -0.0001772952 0.0144120323 -0.1010342497 0.1590733486 0.0249589001 -0.0068224558 0.0215480296 0.0819718412 0.0668401883 0.0318231034 0.0680483986 -0.1807707097 -0.1997917789 0.0790221026 0.0361919422 0.0188810660 -0.2517393157 0.1959444252 0.2119073763 -0.2028642504 -0.1295149704 0.0137642701 -0.2479494788 0.1736480160 0.2244394400 -0.0162366653 0.0185939921 -0.0109642754 -0.0146986710 0.0134945999 -0.0131920403 -0.0202718631 -0.0053542975 0.0055043304 0.0001010015 0.0060317850 -0.0025914832 -0.0127459322 0.0130952245 0.0022096820 -0.0211603537 0.0022864173 0.0075756041 -0.0117445845 0.0150761897 -0.0146305299 -0.0337761862 -0.0144743010 0.0251041464 0.0159562887 -0.0018349318 -0.0018333860 -0.0209841902 0.0120232219 -0.0005722324 -0.0243960492 -0.0155720565 0.0177733911 -0.0209569739 -0.0183958345 -0.0008778852 -0.0295754017 0.0066296614 -0.0047086486 -0.0004343678 -0.0059135902 0.0012603239 -0.0141539939 -0.0209556443 -0.0109086795 -0.0281237568 -0.0019688257 -0.0169873512 -0.0129363398 -0.0196939561 -0.0011960035 -0.0448290709 0.0189882484 -0.0210426408 0.0193001184 0.0076185594 0.0071102534 -0.0248591588 -0.0310215381 -0.0056309042 -0.0360136623 0.0198033107 -0.0189545425 0.0197529326 -0.0053254694 0.0013208965 0.0218110070 -0.0082442798 -0.0040720607 0.0265254678 0.0141161735 0.0043267808 0.0253143241 0.0157002561 0.0136289424 -0.0080238107 -0.0040818510 0.0032127748 0.0019004717 -0.0118634939 -0.0112101730 -0.0080514319 -0.0011967970 0.0157660901 -0.0097721684 -0.0067178351 -0.0093310002 -0.0058328191 0.0048278266 0.0309877408 -0.0151997890 -0.0037711452 -0.0215907549 0.0078645284 -0.0033010612 0.0113165610 0.0041293833 -0.0023753146 0.0027522217 0.0127423016 0.0032713113 0.0290041151 0.0099865304 0.0071070472 0.0096147065 0.0026012350 0.0144468623 0.0036993232 -0.0078121278 0.0079227184 -0.0098595060 0.0160895161 0.0092540698 0.0010435002 0.0041759519 0.0063107331 0.0068483245 0.0294700870 0.0046248213 -0.0039159298 0.0074869344 -0.0017629207 0.0154460656 0.0001252769 0.0031101544 -0.0191849100 -0.0081674408 0.0022061541 -0.0058190201 0.0094260788 -0.0031630490 -0.0277313222 -0.0148949531 -0.0095988907 -0.0049753910 0.0742471295 0.0830707647 0.0065492445 -0.0017179375 0.0351572643 0.0492496671 0.1120045989 0.1573327850 0.0125890713 0.0574288644 0.1287917945 0.0430319260 0.0961187198 -0.0440465763 -0.0429886089 0.0462168695 -0.1254562698 -0.0402554335 0.1638899088 -0.0800424382 -0.0112067403 0.0285368004 -0.0107752607 -0.0735339690 0.0604078666 -0.0923521663 0.0483305822 -0.0675703075 -0.0451221917 -0.0270562744 0.0094068944 -0.0387553794 -0.0027709867 0.0068674404 -0.0074105596 0.0238396242 -0.0063484395 -0.0618576527 0.0343460284 -0.0449075189 0.0758792545 0.0182011610 0.0253029290 0.0058141554 -0.0404063023 0.0268609697 0.0414487521 0.0321563724 0.0618639433 0.1118400751 0.0529633347 0.0118310339 0.0233649297 -0.0077112694 -0.1272538773 -0.0496712907 0.0601675909 -0.0402835879 0.0039516817 -0.0172422166 -0.0562631588 0.0300481384 -0.0408865081 0.1145047331 -0.0641480955 0.1111605236 0.1192733317 0.0357264424 -0.0718407838 0.0078813234 -0.0036106758 0.0157069756 0.0141820439 -0.0063905583 0.0228371437 0.0058768627 -0.0035207258 0.0110258317 0.0076653345 -0.0107882777 0.0201158334 -0.0113794852 0.0070153234 -0.0138385299 0.0004262335 -0.0013146050 0.0004022752 -0.0109573456 -0.0006156084 -0.0094345624 -0.0011375604 -0.0093182931 0.0112459535 -0.0262094404 0.0161622750 -0.0386363697 -0.0005860872 -0.0004613605 -0.0064065360 -0.0265828073 0.0049620582 -0.0347605572 0.0073743833 -0.0034024356 0.0058595648 -0.0107748249 0.0055502278 -0.0186036065 -0.0071923387 0.0024763744 -0.0182906249 -0.0073078235 0.0034453258 -0.0159781727 -0.0034139758 0.0005476098 -0.0127860998 0.0015283767 -0.0004868208 0.0057629060 0.0033084606 -0.0005373272 0.0016481931 0.0052523611 -0.0018973683 0.0077735641 0.0025794329 -0.0008963035 0.0069824645 0.0065491091 -0.0023469305 0.0166447981 0.0065023881 -0.0025375524 0.0083159787 0.0051249273 -0.0005257886 0.0202778740 0.0068159920 -0.0009542801 0.0171488588 -0.0081863705 0.0034584816 -0.0281643483 -0.0190573818 0.0076454068 0.0071872647 -0.0457843642 0.0484918998 -0.1103611163 0.1419923485 0.1151366662 0.0314165438 0.0293819935 0.0066927108 -0.0156197194 0.0135746136 -0.0027812684 -0.0058280580 0.0462255591 -0.0637322817 -0.0289610138 -0.0511334061 -0.0161549417 0.0012082499 -0.0270243270 0.0188225607 -0.0181523003 -0.0027263422 -0.0130843842 0.0178791930 -0.0048526362 -0.0140918486 -0.0125391271 0.0394696024 0.0453799258 0.0133688292 -0.0464371752 0.0340162433 0.0400449632 -0.0111975752 0.0279230817 -0.0198791824 -0.0353992631 0.0452829278 -0.0280745507 0.0010192333 0.0036097709 -0.0161675398 0.0133706499 -0.0049273777 -0.0133413250 0.0042348334 -0.0198490790 0.0625188238 0.0224280328 -0.0065349244 0.0061436306 0.0268368843 0.0224014720 0.0130890515 0.0223143273 -0.0613041119 -0.0652592899 0.0260144322 0.0074251717 0.0038635841 -0.0824470588 0.0624494453 0.0662926339 -0.0658393757 -0.0443912286 0.0018092046 -0.0809986249 0.0590424664 0.0720860380 0.1020244584 -0.1064262589 0.0484958459 0.1159103961 -0.0420537478 0.0266988537 0.1200895571 0.0068537716 -0.0083649308 0.0061127128 -0.0247733060 0.0120904029 0.1002309751 -0.0375056747 -0.0500593363 0.1142293006 -0.0517147730 -0.0283845612 0.1111979260 -0.0136214428 -0.0064001269 0.1827103222 0.0350887265 -0.0941463036 -0.0947339679 0.0204099208 0.0134299850 0.1783517705 0.0107446783 -0.0640324441 0.1161218979 0.0043498984 -0.0520073657 0.1538353703 0.0854051436 0.0028290692 0.1505846249 0.0445007782 0.0113783613 0.0141217216 0.0112402659 0.0088112189 0.1003659903 0.0699933586 0.0755975199 0.1272954064 0.0809848620 0.0572643663 0.1290521418 0.0925180399 0.0024772649 0.2047820072 0.0629279296 0.0886305296 -0.1074748942 -0.0532952103 -0.0301053237 0.1714114911 0.0790387267 0.0608916196 0.1134653049 0.0501658601 0.0321313674 -0.1359241439 0.0330118943 -0.0040809256 -0.1297279539 0.0546390518 0.0266184516 -0.1540561052 -0.0709153068 -0.0254946669 -0.1549090609 -0.0918675391 -0.0840840168 0.0125546049 0.0153729358 -0.0058245856 -0.0208348159 0.0360249221 0.0258123671 -0.0065616098 0.0257497120 -0.0324470201 -0.0233665526 0.0165848662 0.0214626691 -0.0147486863 0.0132446419 -0.0629055593 -0.0023016429 -0.0136503250 0.0462258066 -0.0595703323 0.0076296302 -0.0063216861 -0.0651324361 0.0096000758 0.0009570699 -0.0741619624 -0.0058479907 -0.0470552497 -0.0766536537 -0.0089896978 -0.0209857560 0.0103373815 -0.0319739417 -0.0581441234 0.0131762396 0.0074416705 0.0012506588 -0.0740832633 -0.0053348791 -0.0411596510 -0.0656955607 -0.0501713027 -0.0627636508 -0.1334787454 0.0305665893 0.0129121149 -0.0954827994 -0.0377590398 -0.0419206246 -0.0651705550 -0.0249597024 0.0162653509 -0.0121752386 -0.0532258428 -0.0493796535 -0.1467087690 -0.0015044112 0.0277679371 0.0207888523 -0.0208021427 -0.0603611833 0.0253164463 0.0324011657 0.0024487418 -0.0033857170 0.0150163594 0.0178859267 0.0396920411 0.0601593855 0.0062223969 0.0189567703 0.0482342581 0.0151713310 0.0355518893 -0.0114065692 -0.0124239302 0.0066083988 -0.0551545337 -0.0094173846 0.0693019310 -0.0174652227 0.0185823156 0.0200356722 0.0084361870 -0.0362971346 0.0945408847 -0.0005570611 -0.1044839155 0.1570942389 0.0275585541 0.0504952493 0.0825927755 0.0141742572 -0.0018258301 -0.0070100029 0.0279427038 0.0939357460 0.0527078262 0.0059275548 -0.1039596547 0.1193279878 -0.0349161177 -0.0037776728 -0.0446812366 0.0527812778 0.0882530668 -0.0293133385 -0.0006725234 0.0144059159 0.0543717010 -0.0290750841 -0.0229665212 -0.0702885267 0.0365911369 0.0563133712 0.1761975306 0.0311516488 -0.0299903969 0.0545885563 0.0368391901 -0.1215238087 0.0793769473 -0.0889439418 0.0900517247 -0.1953871334 0.0893447824 -0.1350148582 -0.0758998426 0.0405029117 0.1691723919 0.0175641590 -0.0177483465 0.0081062275 -0.0027354703 0.0096842562 -0.0072088995 -0.0065287320 0.0059967433 -0.0047166771 -0.0151002002 0.0038380508 -0.0197990087 0.0046152812 -0.0014693527 0.0211452570 -0.0061513094 -0.0031860031 -0.0063106146 0.0088683451 -0.0120183818 0.0171534406 -0.0125635814 0.0178980434 -0.0183307652 0.0243803979 -0.0094591795 0.0555044451 -0.0032667717 -0.0044485350 -0.0089719140 0.0349020657 -0.0261570006 0.0572256636 -0.0014879143 -0.0071374580 0.0034334412 0.0040924014 -0.0039858007 0.0081624629 -0.0028410703 0.0019256651 0.0026726071 0.0052223573 -0.0019745741 0.0108752693 0.0032212159 0.0006908849 0.0074761914 -0.0018393646 0.0026666055 -0.0052138867 0.0001601917 -0.0008743757 0.0002768778 -0.0038466462 0.0005226205 -0.0078010751 -0.0008140530 0.0023568731 -0.0018702094 -0.0077148131 0.0049058858 -0.0162153392 -0.0029931069 -0.0015292928 -0.0062525588 -0.0099276703 0.0020258470 -0.0190693352 -0.0031350839 0.0026485808 -0.0072957298 0.0076953148 0.0004635137 0.0146715243 0.0140290490 0.0001250852 -0.0149492346 0.0453013705 -0.0417489603 0.1681742755 0.0202213470 0.0053106220 0.0430889171 -0.0035526974 0.0046987113 -0.0029194229 -0.0003769528 0.0030322933 -0.0032670841 -0.0034648826 0.0100567963 0.0007334165 0.0027071339 -0.0003509402 0.0019559771 0.0101914830 -0.0050204130 0.0087035203 -0.0086011866 0.0006228552 -0.0004073129 0.0002989725 0.0018748768 0.0019716926 -0.0010676194 -0.0044531542 -0.0023977218 0.0049800112 -0.0049028376 -0.0041721254 0.0045480049 -0.0060082239 0.0077901616 0.0076187261 -0.0074910448 0.0203737171 0.0042790122 -0.0107445912 0.0017577401 -0.0013075722 0.0074702294 0.0119658097 -0.0087658345 -0.0044945822 -0.0205658198 -0.0173401371 0.0038652002 -0.0011993206 -0.0034106688 -0.0050741835 -0.0117837384 -0.0039346002 0.0102024661 0.0035718792 -0.0055518119 0.0107562404 0.0045988966 0.0079133391 -0.0064868212 -0.0053854669 0.0062210097 0.0009595610 -0.0018460976 0.0070428767 -0.0074028988 -0.0059445715 0.1345603442 0.0086200877 -0.0190650730 0.0914183170 -0.0511351193 0.0711243967 0.0933482403 -0.0175221234 0.0303659426 0.0364857345 0.0803003777 -0.0691832335 0.0702265043 -0.0495009103 -0.0039340136 0.0851705490 -0.0636625353 0.0367613089 0.0357926091 -0.1436914949 0.1554898456 0.1121097843 -0.1190015536 0.0537503265 -0.0756955709 0.0458418714 -0.0361124195 0.0862890360 -0.1069307150 0.0627879531 0.0321658725 -0.1105887303 0.1096388067 0.0128098894 -0.0025045385 0.0415254254 0.0035975150 0.0230222953 0.0018591218 0.0076506077 -0.0030200964 -0.0008725497 0.0275504244 0.0137314604 0.0280037912 0.0106945677 0.0332661744 0.0462955423 -0.0026486387 -0.0267194549 0.0518574798 -0.0098832702 0.0420699333 -0.0082671833 -0.0121792478 -0.0167093184 -0.0215807868 0.0602466439 0.0193162067 0.0218562567 0.0111874600 0.0520547490 0.0527449588 -0.0893514033 -0.0055718857 -0.0041221930 -0.1468332459 0.0314481568 0.0321222240 -0.0474930188 -0.0259455882 -0.0185041884 -0.0017914489 -0.0062679631 -0.0108597909 -0.0142771004 -0.0521450250 0.0469077586 -0.0188080381 -0.0270076443 0.0905193737 -0.1151722566 -0.0075276177 -0.0588407168 -0.1040834231 0.0626279415 0.0492283252 -0.2095142762 -0.0466022695 -0.1588264504 -0.1005915753 0.0684880619 0.0720536364 -0.0583262051 -0.0625975625 -0.0336110529 -0.0950805030 0.0470074947 0.0087959936 -0.0370290156 -0.1039100724 -0.1396812951 -0.0682008003 0.0827243440 -0.0476709446 -0.0596305217 0.0385438798 0.0434481025 -0.0393540151 0.0029123353 -0.0251240032 0.0421730555 0.0038723236 -0.0827932434 -0.0365997732 0.0048937926 -0.0581081290 0.1416466203 -0.0550060508 -0.1599405601 0.0131840982 -0.0444776002 -0.0507107345 0.0143837530 -0.0579357303 -0.0998032312 -0.1118249486 0.0193193865 -0.0555652796 0.1125834691 -0.1060340935 -0.1567814913 -0.1433888965 0.0399107957 -0.0350514058 0.0024036698 -0.0021380839 -0.0027792216 0.0093044098 -0.0019836453 -0.0032322362 -0.0025631923 -0.0118623114 -0.0037020841 0.0085058405 -0.0014185621 -0.0032935993 -0.0066294506 -0.0002400417 0.0030476274 -0.0117621651 0.0003952889 0.0074033809 -0.0065323245 -0.0033610228 0.0006903747 -0.0075171061 -0.0011659313 0.0045603591 0.0049659631 -0.0006097257 0.0148510772 -0.0120160300 0.0026124337 -0.0125978734 -0.0027861775 0.0047345195 -0.0060170033 0.0016966723 -0.0150037815 -0.0295172843 0.0091475433 0.0060250721 0.0200941738 -0.0141599606 -0.0034373994 0.0293407098 -0.0033490956 -0.0012624575 -0.0052276659 0.0050701589 -0.0018519538 0.0237710416 0.0152024307 -0.0155504269 0.0205001983 0.0291774410 -0.0030334200 0.0304619447 -0.0122045118 -0.0080698327 0.0327407629 0.0118400585 0.0042111601 0.0415217513 0.0153165432 0.0290179733 -0.0112836395 0.0295171483 -0.0136229323 -0.0266553290 -0.0306270396 -0.0317214589 -0.0241174782 0.2196051035 0.0162632219 -0.0304486993 -0.0456371792 -0.0324123427 -0.0569465772 -0.0321295499 -0.0053960187 -0.0818344234 -0.0937736262 0.0628028778 -0.1762168316 0.1024077338 -0.0693159759 0.0800540442 -0.0097834653 0.0143819338 -0.0301334843 0.0685112768 -0.0289092814 0.1055530243 -0.0712672071 -0.0063401947 -0.1448830763 0.2713075543 -0.1657792595 0.3614555493 0.0197776408 -0.0033821959 0.0466296109 0.2626593947 -0.1472121417 0.3934353431 0.1065828640 0.0899954512 -0.0551414110 0.1404137156 0.0288595386 0.0055354245 0.1933958249 -0.0047238109 -0.0884236421 -0.0126501768 -0.0493708917 0.0755466816 0.0269902174 0.0293165570 0.0478750870 -0.0597613772 0.0015622012 0.0066363303 -0.0577402457 -0.0435521642 0.0080777733 -0.0153002047 -0.0118778288 -0.0364564284 -0.0208155975 0.0453683787 -0.0165855663 -0.1262855155 0.0359636095 -0.0255903822 -0.0808054101 -0.0651961465 -0.0417951454 0.0019106696 -0.0327160347 -0.1124442724 -0.0408473735 0.0858691993 -0.0617042151 0.0693436190 0.0367997080 0.0874053687 -0.0863677866 -0.0202860887 0.1019105383 -0.0982650828 0.0108992565 0.0693093491 0.0321139086 -0.0179452905 0.0080821121 -0.0184039989 -0.0288091633 0.0331103663 -0.0157396348 -0.0094982456 0.0236823703 -0.0387018638 0.0378612002 0.0081416725 0.0409238417 0.0139933099 -0.0021561123 0.0184071659 -0.0145311248 0.0107957700 0.0064960012 0.0130558726 -0.0149510995 0.0048942934 0.0107897431 0.0091185892 -0.0404904889 -0.0215572189 -0.0085051403 0.0256914503 -0.0141053119 -0.0176720525 0.0046041468 -0.0262108570 0.0150215394 0.0279043079 -0.0360902532 0.0106256089 -0.0017447523 0.0049167187 0.0157527986 0.0056311553 0.0139498461 0.0047724087 0.0052234848 -0.0006941411 -0.0571183152 -0.0330053074 0.0053835741 0.0027978456 -0.0164247421 -0.0136601735 -0.0072551486 -0.0134866716 0.0426385757 0.0465400859 -0.0161110135 -0.0063940314 -0.0032432332 0.0523399485 -0.0320849326 -0.0331620081 0.0406384153 0.0412949844 0.0120130652 0.0532052336 -0.0418778191 -0.0431132767 0.0027745943 -0.0141101031 0.0039213361 0.0086467030 -0.0034140632 -0.0065160607 0.0077973891 -0.0004914731 -0.0013756423 -0.0006152636 -0.0070950393 0.0059105265 0.0090464349 0.0002746221 -0.0078066780 0.0059760075 -0.0078593402 -0.0053823689 0.0090448597 0.0067257296 -0.0185181298 0.0114591058 0.0099158805 -0.0107241856 -0.0067193096 0.0011291470 0.0064818724 0.0198392097 0.0120668502 -0.0150937109 0.0096623115 -0.0034196568 -0.0108914978 0.0156966139 0.0200391189 -0.0024789596 0.0099999197 0.0222709985 0.0039883906 0.0132715623 -0.0261690494 0.0146197990 0.0011955019 0.0179106180 0.0090168442 0.0077808120 0.0175375416 0.0000782568 0.0048413449 0.0539224903 -0.0138016151 0.0021652816 0.0614415383 0.0060474885 -0.0038541428 -0.0192738842 -0.0026703431 -0.0144060705 0.0501755031 -0.0009673661 -0.0136138537 0.0458126885 -0.0150311487 -0.0134129991 0.0054263918 0.0015441408 -0.0028967753 0.0039747536 0.0019133891 -0.0239599217 -0.0067281652 -0.0108505185 -0.0084522850 -0.0034469379 -0.0108236888 -0.0032896820 0.0061675495 -0.0093133431 -0.0069214018 -0.0048498817 -0.0309647984 0.0046087053 0.0148855912 0.0259246466 -0.0092153369 -0.0126436726 -0.0207923383 0.0186368707 0.0303969113 0.0656610399 -0.0091132190 -0.0240883870 -0.0351127135 -0.0042885906 0.0103452801 0.0242055465 -0.0079875967 -0.0028331040 0.0044278952 -0.0004381762 0.0260519867 0.0645638737 -0.0063619529 0.0018878622 0.0244267553 -0.0070663752 0.0133091980 -0.0082574258 -0.0147596108 0.0195565232 0.0005265779 0.0093526784 0.0006747714 -0.0189360551 -0.0217640830 -0.0078013239 -0.0057107677 0.0369156952 -0.0057932364 -0.0221374901 -0.0232255633 -0.0139488061 0.0061926166 -0.0051236935 -0.0106878042 -0.0210658040 -0.0163511068 -0.0123664359 -0.0130323973 0.0069169460 -0.0265934234 -0.0476238193 -0.0077159976 -0.0175254423 -0.0191297763 -0.0344301466 -0.0374188385 0.0057721942 -0.0360810595 -0.0112204292 -0.0139948361 -0.0315162158 -0.0338069432 0.0119058983 -0.0417174195 -0.0685421559 -0.0156534414 -0.0149073186 0.0162695202 0.0061012301 0.0079371777 -0.0194493190 -0.0241521096 -0.0460191269 0.0653057597 0.0317597596 0.0073460875 0.0508243603 -0.0452970828 -0.0061252101 0.0183458038 -0.0134352145 0.0315706949 -0.0192449660 -0.0426048868 -0.0061017772 -0.0018889085 -0.0049888497 0.0403120441 0.0261356088 0.0706933867 0.0382774126 0.0032536410 -0.0296018503 0.0176023010 0.0360433132 0.0454991379 0.0984417553 -0.0127006408 -0.0206204445 -0.0033728790 -0.0105043877 -0.0334669341 -0.0665689452 0.0690354311 0.0254257421 -0.0248593084 0.0002173432 -0.0246677350 -0.0242993509 -0.0370913823 0.0686572723 0.0280246196 0.0144041188 -0.1229388130 0.0033857265 -0.0380964712 0.0155759328 -0.0208807798 -0.0115097317 0.0077719972 0.0439336907 0.0594305442 0.0422223874 0.0691470401 -0.0340816223 0.0663086275 0.0033124649 0.0049374546 0.0010580337 -0.0139867719 0.0066587045 -0.0163920795 -0.0425138758 0.0169302282 -0.0577666105 0.0181299194 -0.0106658362 0.0410743687 -0.0110790345 -0.0025921855 -0.0159812502 0.0205302111 -0.0221275067 0.0379313365 -0.0367038076 0.0204868732 -0.0513651686 0.0807639962 -0.0460116189 0.1450551593 0.0059829391 -0.0115013688 0.0033509537 0.0965566147 -0.0663540350 0.1518979286 0.0170388271 -0.0050094290 0.0099926416 0.0021859238 0.0006036277 -0.0076967472 -0.0098559771 0.0136248129 -0.0455729035 0.0023515933 -0.0042668873 0.0107189437 0.0015530764 0.0024080586 0.0064729377 -0.0050210193 0.0014614450 -0.0029963786 -0.0025891579 -0.0029881496 0.0039920113 -0.0040235272 0.0000058363 -0.0059825599 -0.0018927039 0.0033280142 -0.0005466515 -0.0139327052 0.0053083466 -0.0151979720 -0.0087565589 -0.0020826733 -0.0092731032 -0.0062995342 -0.0006948261 -0.0215970036 -0.0046753653 0.0053171049 -0.0070354929 0.0041135173 0.0028767461 0.0088639030 0.0053488310 0.0009734734 0.0128744004 0.0072904661 -0.0112098248 0.0228803106 -0.0695630571 0.0991635502 -0.0581436895 0.0012167666 -0.0013306916 -0.0000865328 0.0007060528 -0.0007015699 0.0013834501 -0.0010012627 0.0023814092 0.0000750920 0.0001643306 0.0001171173 0.0005657657 0.0019111887 -0.0011736869 -0.0023856517 -0.0036778819 0.0011848386 -0.0005255574 -0.0000022432 0.0003919452 0.0003456471 0.0007519012 0.0012673381 -0.0003041919 -0.0002527040 0.0009499197 0.0008556540 0.0029127623 -0.0020177188 -0.0011714677 0.0007198107 -0.0023169851 0.0030797025 -0.0004421957 -0.0032666798 -0.0050138716 0.0002398391 0.0041697387 0.0030928831 -0.0029485556 -0.0029337141 -0.0085697202 -0.0077248741 0.0035831825 -0.0012477615 -0.0007718799 -0.0009927459 -0.0022073417 -0.0009167055 0.0020526300 0.0013332395 -0.0014892695 0.0015006119 0.0004975075 -0.0007571392 0.0016224765 0.0016099802 -0.0004718023 -0.0005272217 0.0004125834 -0.0005655419 0.0005574416 0.0011396411 -0.0197056582 0.0192165619 -0.0015967313 -0.0206818361 0.0141393550 -0.0009615416 -0.0221960541 0.0012526488 0.0010991764 -0.0055456709 -0.0003829078 0.0012161186 -0.0239848509 0.0096593850 0.0100449114 -0.0227357176 0.0184255424 0.0058123707 -0.0162973361 0.0084162021 0.0078355288 -0.0299536274 -0.0021266930 0.0120300611 0.0171705318 -0.0073055168 -0.0033244917 -0.0403536572 0.0050503364 0.0074961523 -0.0228121976 0.0206183637 0.0049952559 -0.0023568994 -0.0307302550 -0.0346328226 0.0219686472 -0.0747043555 -0.0116590810 -0.0384111799 0.0837272110 -0.0387395727 0.0182764391 -0.0541483082 -0.0224493456 0.0150259024 -0.0430347506 -0.0297771856 0.0442987858 -0.1265913269 -0.0041728516 0.0773302548 -0.2045015874 0.0187950214 -0.0200119206 0.0555528022 0.0222326614 0.0660097766 -0.1733704845 0.0138500738 0.0784039609 -0.1636348714 0.0031418955 0.0306598906 -0.0065268463 -0.0005929395 0.0217951749 -0.0090620489 -0.0065213370 0.0658901182 0.0270003642 0.0457674422 -0.0361760520 -0.0238101854 0.0162533504 -0.0233937213 -0.0186552128 0.0403233757 0.0370414548 0.0133859342 0.1039384945 -0.0698118994 -0.0467400697 -0.0682776920 -0.0417442403 0.0242555531 0.0817941446 -0.1040662010 -0.0984166304 -0.1976727840 -0.0468269462 0.0631344291 0.1180075905 0.0017704899 -0.0604986783 -0.0534759094 -0.0059462421 -0.0105058954 -0.0045858154 -0.0253842416 -0.1109221130 -0.1896914219 0.0055013414 -0.0019514012 -0.0933061740 0.1300497968 -0.0591172837 -0.0546494094 0.0735619325 -0.0553843916 -0.0687153940 -0.0955027804 0.0638741406 0.0669886120 0.0404166007 0.0024324751 -0.0203612980 -0.3370819955 0.1648819875 0.1849158514 -0.0166593695 0.0210371417 0.0304100591 -0.1161436709 0.0606932028 0.0525756811 0.0544404965 -0.0218979743 -0.0628793638 -0.3255760505 0.1843676439 0.2085722088 0.0337372337 -0.0246502927 -0.0525410382 -0.0008004022 0.0003114054 -0.0012699183 -0.0062848261 0.0023269199 -0.0022279141 0.0015732990 0.0041942072 0.0010494225 -0.0022618332 -0.0037219350 -0.0038755991 0.0050956510 0.0026495259 0.0030631049 -0.0046937072 -0.0229729012 0.0001879617 0.0110271178 0.0126416616 0.0227862491 0.0119888323 0.0162524277 -0.0170647098 0.0092797064 0.0316244586 0.0195718971 0.0056273385 0.0143039735 -0.0751235433 -0.0158244861 0.0343653179 -0.0286767939 0.0596508489 -0.0193903184 -0.0127208649 0.0956366829 0.0286279311 0.0152750252 -0.0132843001 0.0044378006 0.1302376804 0.0616075094 -0.0101847124 -0.0059345950 0.0037275967 -0.0248055658 0.0475761945 -0.0028107191 -0.0316780635 0.0689976348 0.0691721944 -0.0153354833 0.0863403025 -0.0031836019 -0.0128486464 0.1412264476 0.1128363581 0.0066230365 0.0024020585 0.0594847307 0.0494530194 -0.0064495458 0.0277640123 -0.0343263215 -0.1136225407 -0.1517128185 -0.0597458069 -0.0034456917 -0.1152819096 0.1307691422 -0.2898780673 -0.0304727465 -0.0376509820 -0.0221808714 0.0323226990 -0.0286623177 0.0200098599 0.1044968203 -0.0377834129 0.1197841961 -0.0143973511 0.0027511071 -0.1070771869 0.0281361968 0.0142209386 0.0369167695 -0.0417746998 0.0550548241 -0.0725995998 0.0880768266 -0.0772221387 0.1042316184 -0.1520297424 0.0825354903 -0.3338330696 -0.0228526145 0.0395148755 -0.0079728875 -0.2131613277 0.1511344619 -0.3313575436 0.0059328121 0.0712178472 -0.0748863298 0.0823499036 0.0186036333 0.0265510789 0.1621055398 -0.0526803841 0.1122037436 -0.0183493833 -0.0145591802 0.0028991132 0.0082547192 0.0100295342 0.0021820233 -0.0183745618 -0.0065105742 0.0163223535 -0.0267412162 -0.0161665940 -0.0054748470 0.0053322702 -0.0065518878 0.0017956611 -0.0045388858 0.0141831011 -0.0055610248 -0.0255016294 0.0001884876 0.0447119242 -0.0157931309 -0.0348208862 0.0179279955 0.0294263041 -0.0191616262 0.0135285407 -0.0048274583 0.0312340546 -0.0050061516 0.0214530053 0.0125453868 0.0139435386 -0.0909305461 -0.0047057667 0.0002692716 -0.0903627739 0.0726154945 0.0716643661 0.0375279983 -0.0346399650 -0.0087149584 -0.0215107395 -0.0070842947 0.0127500741 -0.0180773857 -0.0013656969 0.0043374260 -0.0186418136 0.0104193393 0.0019535883 0.0251857687 0.0090621966 -0.0018141237 0.0099655133 -0.0076092536 0.0181371929 0.0050919081 0.0116276508 -0.0087958781 0.0036249479 0.0081777321 0.0070946043 -0.0303384278 -0.0202357199 -0.0009774239 0.0158482140 -0.0128227973 -0.0142979681 -0.0083676465 -0.0234533352 0.0222013809 0.0204848844 -0.0263803655 0.0107330823 -0.0052426895 0.0148473031 0.0276709299 -0.0173106697 -0.0020808001 0.0089876458 -0.0030687138 0.0345509873 -0.0255837444 -0.0095102539 0.0063432227 -0.0014669330 -0.0077691829 -0.0041513076 0.0010290735 -0.0061950314 0.0253010978 0.0283098192 -0.0071561503 -0.0030401101 -0.0002889435 0.0356493628 -0.0286404257 -0.0291470706 0.0262070664 0.0306635007 0.0060946356 0.0342555804 -0.0275723990 -0.0312170253 -0.0229916795 -0.0188041572 0.0121401461 -0.0043017862 0.0081397897 -0.0210175155 -0.0062795197 0.0054108761 -0.0089423073 -0.0090028252 -0.0233487597 0.0198817140 -0.0058917875 0.0148570012 -0.0099851031 -0.0140226391 0.0037720573 -0.0098687589 0.0069982659 0.0400807900 -0.0540693859 -0.0025360891 0.0369917289 -0.0275547439 0.0058831413 -0.0070373201 0.0149000951 0.0041782334 0.0455014557 -0.0369602401 0.0001504321 0.0240244532 -0.0324445002 0.0164448022 0.0217370168 -0.0238901664 0.0089185550 0.0206562976 0.0048519555 0.0158593434 -0.0366718365 0.0221959406 -0.0095039491 0.0179407603 0.0016627718 0.0109519216 0.0069536734 -0.0225499749 0.0086582175 0.0797912071 -0.0443576055 0.0014971289 0.0748625716 0.0113354707 -0.0019389931 -0.0178489243 0.0072204713 -0.0509062620 0.0674148173 -0.0110217844 -0.0229314140 0.0423911801 -0.0494919085 0.0001883042 0.0082224125 0.0034459723 0.0250948608 -0.0013749603 -0.0034836241 -0.0095143202 0.0032322480 -0.0051755087 -0.0132232403 0.0006440673 -0.0112504451 -0.0427694410 0.0047303020 0.0076038826 0.0217067370 -0.0023929580 0.0055915384 -0.0656564594 -0.0011520041 0.0131826565 -0.0829572492 -0.0190567933 0.0211008455 -0.0493032084 -0.0045545515 0.0081541893 -0.0890952845 -0.0119461313 0.0137882438 -0.0105013431 -0.0340562980 0.0220475140 -0.0311824071 -0.0232713778 0.0130592748 -0.0341037043 -0.0346239948 0.0136212804 -0.0096249063 0.0077373651 -0.0128476388 0.0705451367 0.0057418855 -0.0466966796 -0.0098426394 0.0219880485 -0.0480819883 -0.0181449019 0.0537920038 -0.0180038381 -0.0383765092 -0.0063353929 -0.0294451952 -0.0898534251 0.0924036296 0.0355376448 -0.0811523634 -0.0201275133 0.0530250774 -0.0940562023 0.0076937851 -0.0461543752 -0.0228417586 -0.0441869210 -0.0987559992 -0.1768838225 0.0374037125 -0.0238395546 -0.0108783767 -0.0710450150 -0.1122880683 -0.0194713066 -0.0223453924 0.0104285321 -0.0039285428 -0.0191550078 0.0063274995 -0.0276854880 -0.0388390860 0.0126598015 -0.0055350851 -0.0207016880 0.0086302277 -0.0264075984 0.0130876484 -0.0066311863 0.0171977012 0.0665114864 -0.0164853801 -0.0661736755 0.0142980097 -0.0506404787 -0.0246895342 -0.0136087416 0.0296997514 0.0322474488 0.0552526951 -0.0241142562 0.0644867958 0.0359903326 -0.0859798719 0.0110925522 0.0591062525 -0.0380816482 0.0720801508 -0.0128993700 -0.0124500160 0.1406738312 0.0536690360 -0.0073024179 -0.0758031789 0.0123043581 -0.0206995721 -0.0184497457 -0.0171990829 -0.0362478266 0.0176538645 0.0197109707 0.0002020606 -0.0031640010 0.0040111714 0.0047978204 0.0493071754 -0.0024649450 -0.0230888829 -0.1255617347 -0.0474703992 -0.0009128748 0.1900590450 -0.0376363158 0.0769772254 0.0101038249 0.1331138344 0.0154730241 0.0554036920 -0.1159797534 -0.1129423044 -0.1479988961 -0.1329942384 -0.0512791599 -0.0044366207 -0.1352475894 0.3281812900 0.0430269292 0.0591873684 0.0291946079 -0.0185347611 0.0421934750 -0.0005302378 -0.0710721913 0.0385182321 -0.0715445734 -0.0134578155 0.0209329736 0.0854430299 -0.0158130051 -0.0052559191 -0.0207685305 0.0353393934 -0.0274909333 0.0364740816 -0.0510119088 0.0953708526 -0.0564478019 0.0769471986 -0.0333788794 0.2350314120 0.0256075347 -0.0252714567 0.0136736484 0.1481763597 -0.0844610783 0.2105048168 -0.0700842525 -0.1137199091 0.1117664540 -0.1517310904 -0.0449461682 -0.0059163983 -0.2687596438 0.0526570421 -0.0541565662 0.0356522711 0.0341171233 -0.0133543974 -0.0141688776 -0.0267208647 -0.0070555407 0.0462598614 0.0097657270 -0.0270246713 0.0548641824 0.0364421012 -0.0026259676 -0.0039126183 0.0118131937 0.0030491140 0.0098629611 -0.0334021480 0.0033789692 0.0779121035 -0.0110576099 -0.0606877775 0.0448468742 0.0695362509 -0.0237164708 -0.0481863355 0.0385604941 0.0073980564 0.0117432662 -0.0691035184 0.0050393166 -0.0388336060 -0.0344712682 -0.0203940828 0.1971522696 -0.0206290623 -0.0496956285 0.2350463289 -0.2216744933 -0.0435770467 0.0265140596 -0.0344225481 0.0060227680 0.0068895200 0.0203294851 -0.0214557055 0.0182279005 0.0080435499 -0.0149573687 0.0186383585 0.0056056847 0.0102110937 -0.0163782120 -0.0068116217 0.0022379942 -0.0072555494 0.0063080129 0.0077187639 -0.0130683584 -0.0019869652 0.0002714860 -0.0019163255 -0.0044483515 -0.0040308317 0.0297796734 0.0075621628 -0.0035794480 -0.0052917304 -0.0012326199 0.0010833387 -0.0040694519 -0.0111117563 0.0183074675 -0.0092838515 0.0127671289 0.0049561149 -0.0065907864 0.0170796941 0.0162192067 0.0079768001 0.0142024776 0.0177302543 -0.0093646798 -0.0089847827 0.0060363563 -0.0267543135 0.0239457819 -0.0189469682 -0.0024560472 -0.0030180961 0.0034188694 -0.0010665954 -0.0071380548 -0.0007759999 -0.0018525646 -0.0108559832 -0.0066744188 -0.0204264880 0.0105349005 0.0118380601 -0.0128543813 -0.0317009039 -0.0137197419 -0.0197779653 0.0137954139 0.0145527823 0.0105382356 0.0137968502 -0.0147702457 0.0017923297 -0.0049706053 0.0033234456 0.0018186052 0.0019300892 0.0031104814 0.0070286097 0.0188054499 -0.0125442698 0.0005609115 -0.0070317680 0.0093651398 0.0027876104 -0.0003817217 0.0006303721 -0.0120686935 -0.0087119513 0.0013527040 -0.0020284222 -0.0219507447 0.0186549152 -0.0026787131 0.0077845396 -0.0057410815 -0.0049584851 -0.0282219013 0.0285061866 -0.0000457416 -0.0104372207 0.0073111101 0.0080435447 0.0127169603 -0.0033901974 -0.0021929176 0.0254166222 0.0025443043 0.0128921180 -0.0296552018 0.0154390998 -0.0108314105 0.0171850437 0.0018594090 -0.0019966289 0.0066310304 -0.0048860217 -0.0048466791 0.0586024246 -0.0187422152 -0.0172074359 0.0746654768 -0.0018425611 0.0059233827 -0.0164105948 -0.0021287571 -0.0415807460 0.0656815471 -0.0116248443 -0.0331517937 0.0519347375 -0.0250212365 -0.0030426841 -0.0031105370 0.0010667854 -0.0057559988 -0.0027998537 0.0029055303 -0.0146314952 -0.0036100789 -0.0110613515 0.0057827608 0.0053811085 -0.0059565572 -0.0450912727 0.0075739702 0.0379186367 0.0312334774 -0.0075737995 0.0253335853 -0.1006947701 0.0024480320 -0.0045367032 -0.1236296488 -0.0091595236 0.0306395222 -0.1032750951 -0.0205888379 -0.0580683250 -0.1320873408 -0.0096314306 0.0080151798 -0.0229172853 -0.0639370195 0.0063960100 -0.0536749250 -0.0126496387 0.0284630858 -0.0577592755 -0.0771011774 -0.0356059690 -0.0162552909 0.0416991766 -0.0078436208 -0.0120915080 0.0027678696 -0.0158450278 -0.0050125841 0.0283783857 0.0239690658 0.0103480398 -0.0213111283 0.0052155792 -0.0086216208 -0.0066859649 0.0256435287 0.0418781963 -0.0198098596 0.0185416686 -0.0235910131 0.0135154581 0.0147968142 0.0205145155 0.0090670833 0.0180385958 0.0285325738 -0.0081036236 0.0347260544 0.0301502688 -0.0085894593 -0.0113998341 0.0499702264 -0.0174632562 0.0213690328 0.0182108616 0.0187911092 -0.0147208532 0.0252234796 0.0120814702 -0.0094353790 0.0131454831 0.0104763459 -0.0215531071 0.0181259060 0.0246856129 -0.0101462070 0.0082394379 -0.0118086945 0.0128603562 -0.0412311243 -0.0229469347 0.0433700479 0.0554003096 -0.0409993352 0.0258991841 0.0084560520 -0.0145368789 0.0160885797 -0.0459544629 -0.0603986500 0.0695469339 -0.1628270089 -0.0099668847 -0.0080945725 -0.0798573886 -0.0143284917 -0.0047275113 0.0369802672 -0.0165430687 0.0232052628 0.0095476399 -0.0758730121 -0.0213560779 0.0147441286 0.0020235870 0.0998771426 0.0458035528 -0.0031020372 0.0363958994 -0.0069086965 -0.0252975543 0.0335771758 0.0285229290 -0.0633613662 0.0212667953 0.0518254175 -0.0227161947 0.0586769715 0.0838864829 0.0975164352 0.0832858234 -0.0298302655 0.0102823580 -0.1343134180 0.0018476278 -0.0308123595 -0.0112884538 -0.0108629055 0.0417748513 0.0204394704 -0.0327438011 0.0844066009 0.0298897999 0.0042697112 -0.0838470353 0.1713796120 0.0021551118 0.0214387451 0.0117868071 -0.0248743638 0.0124124648 0.0014676002 -0.0290451056 0.0166776524 -0.0564862807 -0.0025226046 0.0006230746 0.0456151837 -0.0201442908 -0.0167870149 -0.0066008965 0.0228473161 -0.0160987203 0.0182409665 -0.0134394767 0.0584729530 -0.0409664503 0.0475758177 -0.0502046375 0.1178164494 -0.0007517879 -0.0266339127 0.0195653668 0.0882427652 -0.0302416685 0.1267017534 -0.0321398715 -0.0727656930 0.0501968349 -0.0738586149 -0.0358621868 -0.0062418005 -0.1385534398 0.0177551779 -0.0308936989 0.0203218716 0.0114990383 -0.0087186030 -0.0135971911 -0.0034489568 0.0003861421 0.0249457183 0.0109098724 -0.0130411384 0.0235574648 0.0185273072 0.0016793898 -0.0081337168 0.0076398934 0.0057320603 0.0041063286 -0.0099561865 0.0031031503 0.0347784449 0.0040410209 -0.0274118694 0.0179017898 0.0421930534 -0.0107793054 -0.0277533349 0.0197007728 0.0053347127 0.0044052758 -0.0342821735 0.0024129960 -0.0258239459 -0.0065934393 -0.0081427282 0.0872219054 0.0124694405 -0.0135602052 0.1050614093 -0.0392484222 0.0032563866 0.0565894744 -0.1014291900 0.0312603034 0.0092857675 0.0060004953 -0.0073353340 0.0130935074 0.0028896144 -0.0042906714 0.0099988795 0.0013817797 0.0030898171 -0.0114908112 -0.0026888956 -0.0010556649 -0.0066252274 0.0055411594 -0.0053543078 -0.0041546640 -0.0069913783 0.0060355394 -0.0016661906 -0.0044401056 -0.0042289982 0.0190055170 0.0083464615 -0.0024319566 -0.0054363423 0.0028258994 0.0038542599 -0.0015699944 0.0099977847 -0.0066103322 -0.0104808715 0.0156713242 -0.0064947044 0.0030836644 -0.0000430158 -0.0049645268 0.0121935395 0.0045796682 0.0193868154 -0.0002621838 -0.0192146166 0.0109283103 -0.0046124954 0.0116867425 -0.0093160714 0.0019465606 0.0000760800 0.0001325120 0.0011516960 -0.0097786938 -0.0090857027 0.0008551605 -0.0043428308 -0.0035752209 -0.0161818164 0.0116025787 0.0121783702 -0.0107123270 -0.0202277410 -0.0064306990 -0.0149464315 0.0112943562 0.0126128291 -0.0971754164 -0.1156222662 0.1219903563 -0.0105855474 0.0348467773 -0.0304501158 -0.0013298188 0.0431059450 -0.0658051665 -0.0487057586 -0.1395697772 0.0975436851 -0.0137084978 0.0555942306 -0.0537002964 -0.0245464141 0.0418397062 -0.0256147296 0.0736889606 0.1795902008 -0.1615054729 0.0617642580 0.2071598608 -0.2095774035 0.0135270121 -0.0515201185 0.0567545325 0.0267803129 0.2221313857 -0.2048679400 0.0405016598 0.1969939546 -0.1532102453 0.0012026801 0.0095816165 0.0136637002 -0.0294460651 0.0601700236 0.0126593743 0.0258461488 -0.0684576170 0.0376439749 -0.0332449437 0.0423459937 0.0117866226 -0.0093829953 0.0083026130 0.0066374352 -0.0283316753 0.1013695731 -0.0169424769 -0.0760170065 0.1801111767 -0.0105492356 0.0223406554 -0.0410893122 -0.0122847379 -0.1006708045 0.1498580589 -0.0181609420 -0.0644461078 0.1008188558 -0.0267763379 0.0098082664 0.0327609646 0.0008188787 0.0681189343 0.0081643229 -0.0175385610 -0.0354469877 -0.0130503932 -0.0329096251 0.0364675629 0.0237233192 -0.0070866341 -0.0124119866 0.0403835406 -0.0351184693 0.0250853638 0.0617707087 0.0363943751 0.0393349488 -0.0201330728 -0.0264233624 0.0513018157 -0.0187356318 0.0454924202 0.0944692249 -0.0319206651 -0.0536624025 0.0577971898 0.0012193140 0.0879658393 0.0159374853 0.0317692997 -0.0057670397 0.0404025223 -0.0440296061 -0.0255252273 -0.0363691884 0.0190532937 -0.0443272999 0.0086517344 -0.0975597793 -0.0819412257 0.0227278426 0.0215766909 0.0047145887 -0.0619617346 0.0330219337 -0.0128471553 0.0289008090 0.0368014419 -0.0518799044 -0.0549033581 0.0159477725 -0.0271859688 0.0504390096 0.0197200342 -0.0750443215 -0.0703702978 -0.0142478027 0.0425130452 -0.0525774003 -0.0217425161 -0.0721774300 -0.0514065304 -0.0225623552 -0.1000687803 -0.0166452759 -0.0440216129 -0.1039250691 -0.0157128352 -0.0546676102 -0.1272518620 0.0101467999 0.0109642469 -0.0084607841 0.0096471129 0.0114340006 -0.0086145874 0.0114976314 0.0151195247 -0.0141221168 0.0000847146 0.0089772101 -0.0078296802 0.0091912457 -0.0097008070 0.0055167314 -0.0131921764 -0.0197391226 0.0173174440 0.0298886180 -0.0194377372 0.0157206244 0.0047934348 -0.0046329702 -0.0006933295 0.0314978146 0.0695852842 0.1745400829 0.0097623785 -0.0054114295 -0.0525026540 0.0130466147 0.0165642131 0.0041666172 -0.0208160867 -0.0085638416 -0.0284084708 -0.0034043178 0.0865337704 0.1602194565 0.0230970613 -0.0213443867 0.0270015084 0.0006233571 0.0012929649 -0.0064478902 0.0130118188 -0.0164458204 0.0110197555 -0.0319587372 0.0324979014 0.0495504613 0.0323967064 -0.0200555622 0.0117931626 0.0079234566 -0.1236827652 -0.0071241033 -0.0588404168 0.0987179678 -0.0610146012 0.0728271678 -0.0466167830 0.0000223541 -0.0288567503 0.0514909035 -0.0723436335 -0.1277650627 0.0277210453 0.0616229043 -0.0329663687 -0.0491548873 0.0761915954 -0.0080131282 0.0040663345 0.0170378057 -0.0204854018 0.0019161843 0.0096910392 0.0101950046 0.0043455928 -0.0284368310 -0.0035073736 -0.0020469795 0.0129664363 -0.0199285536 -0.0130603759 0.0021319497 0.0179903373 -0.0000331513 0.0039233684 0.0176089631 0.0430416412 -0.0202010650 0.0126123108 -0.0442408904 0.0247136339 -0.0219561875 -0.0126655442 0.0121712748 0.0394454334 0.0209431482 0.0502715554 -0.0304043389 -0.0580564641 0.0211410896 -0.0441736090 -0.0397735614 0.0022278455 -0.0866810357 -0.0064854378 0.0053638401 0.0175112764 0.0027131581 -0.0092348121 -0.0141885431 0.0065994248 0.0039042092 0.0220507651 0.0131061983 -0.0082755934 0.0121834740 0.0132240801 0.0004593126 -0.0104629533 0.0063384187 0.0080340319 0.0035872900 -0.0008286110 0.0012229863 0.0260736128 0.0106017946 -0.0108007256 0.0108642577 0.0357321128 -0.0023744546 -0.0190979907 0.0118160072 0.0093474982 0.0034306771 -0.0250335626 -0.0001003357 -0.0213478276 0.0045643561 -0.0003219151 0.0602306864 0.0195158205 -0.0102255964 0.0861367544 -0.0275243864 0.0974944040 -0.0389836774 0.1041559338 -0.0392856710 0.0012808762 0.0031083987 -0.0052082654 0.0036481940 0.0020479183 -0.0033938314 0.0021825572 0.0033363129 0.0013033341 -0.0025456559 -0.0004474744 -0.0004586056 0.0000916858 -0.0004051781 0.0051303862 -0.0018777590 -0.0028348930 0.0023435192 -0.0000741893 0.0002854031 0.0007332435 0.0060623914 0.0024414836 -0.0008436948 -0.0012598509 0.0002216118 0.0010106854 -0.0052667595 -0.0026210818 0.0047492436 0.0004875211 0.0025138161 0.0004559293 0.0048861264 0.0008410963 0.0082719574 0.0107738362 0.0069458953 0.0137279801 0.0005661283 -0.0170323965 -0.0052223289 -0.0072913537 0.0075702627 -0.0053496442 -0.0005182845 -0.0007117837 -0.0019301630 -0.0009469926 0.0021750773 0.0001501311 -0.0011719713 0.0030256940 0.0017595966 -0.0047487894 0.0032230905 0.0038835447 -0.0028115627 -0.0067915039 -0.0018735097 -0.0040433858 0.0029330032 0.0036873926 -0.0139468785 -0.0708779134 -0.0136590634 0.0093465486 -0.0621998071 -0.0590061868 0.0207273528 -0.0063335512 -0.0405529554 0.0040104961 -0.0190395606 0.0053156669 0.0241871511 -0.0148202811 -0.0453252576 -0.0072968456 -0.0634015844 -0.0564989353 -0.0076920833 -0.0512058247 -0.0775520681 0.0245398619 0.0344587134 -0.0644164864 -0.0014307745 0.0275023174 0.0572880647 0.0671735348 0.0100204064 -0.0528600723 0.0115802794 -0.0763887496 -0.0712341442 0.0145749446 0.0072233372 -0.0311873205 0.0487637940 -0.0554514964 -0.0161093535 -0.0132151799 0.0545366018 -0.0309449039 0.0503945123 -0.0422610260 -0.0097043213 0.0247536944 0.0162584454 -0.0241395197 0.0449818556 -0.0713317394 -0.0058373855 0.0976282275 -0.1608995134 0.0144355880 -0.0377081618 0.0353844697 0.0237699083 0.1171134211 -0.1524229034 0.0207811175 0.0717510827 -0.0712175262 0.0014037423 -0.0947595973 0.0421277221 0.0281002482 0.0598229152 0.0025308016 0.0186086261 0.0320443156 0.0207581230 0.0398307496 -0.0687647620 -0.0349685968 -0.0022906394 -0.0194163487 -0.0559670084 -0.1426351645 -0.0431108911 -0.0696910850 -0.1669965854 0.0278209680 0.0457965815 0.1223498524 -0.0038601820 -0.0270566875 -0.0783252705 0.0764443261 0.1755217626 0.4479128241 0.0087040474 -0.0049521695 -0.0118272172 0.0169233867 0.0485290090 0.1164125230 -0.0100906229 -0.0091600359 -0.0343948720 0.0999052122 0.1543794061 0.4010214222 0.0040875165 0.0242026938 0.0858787398 -0.0133315371 0.0208653896 0.0075677014 0.0348693581 -0.0132456433 -0.0282522576 -0.0123768558 0.0186420487 0.0154390021 0.0338101521 -0.0185700041 -0.0145595767 -0.0134299878 0.0220341036 0.0187639998 0.0778091518 -0.0463290816 -0.0319784317 0.0025311512 -0.0037234549 -0.0125351195 -0.0292415839 0.0066735032 0.0142436204 -0.0279789585 0.0080400542 -0.0022784887 -0.0822673069 0.0247882348 0.0462407882 0.0012468282 0.0041100961 -0.0043829875 0.0005532672 0.0052532854 -0.0052491625 0.0021022096 0.0064919038 -0.0063056025 -0.0031648140 0.0023161321 -0.0048840548 0.0048967606 -0.0006574818 0.0021257805 -0.0053252768 -0.0082725509 0.0067305580 0.0108950726 -0.0016550517 0.0070957942 0.0077676257 0.0005941393 -0.0005826948 0.0009755191 0.0059242898 0.0365561622 -0.0201682464 0.0059939499 -0.0180251306 -0.0141189859 0.0101798950 -0.0066759695 0.0176142289 -0.0033456659 0.0063629132 0.0266467874 0.0015358783 -0.0015013367 0.0173676548 -0.0104100855 -0.0329827596 -0.0000054246 -0.0047016682 -0.0049654924 0.0040145434 -0.0018746838 -0.0178591836 0.0060929630 0.0051414957 -0.0186617412 0.0030502103 -0.0113019921 -0.0334961759 -0.0175311994 -0.0224132012 -0.0146306684 0.0030921414 0.0350840056 -0.0522661450 -0.0008336326 0.0087626985 0.0224276700 -0.0148373574 -0.0172246355 -0.0112455543 0.0172138021 0.0098352477 0.0219739967 0.1759105586 0.0805897646 0.0916421689 0.1222017229 0.0632477365 -0.0916964550 0.1242302620 0.0438471190 -0.0656094803 -0.1540313855 0.0510904906 0.1191087295 -0.0251135886 0.0474869313 0.0219562091 0.1258442153 0.0912747356 -0.0337013396 -0.0492705670 -0.0088976562 0.0105624817 -0.1454926353 -0.1154649282 0.0875034234 -0.0659955200 0.2995973418 0.0590388610 0.1584474192 0.0780978408 -0.0685401798 -0.0622853993 -0.2136729133 -0.0943855268 0.0071373528 0.1928126020 0.0605578002 -0.0227359695 0.1904424614 0.0029438868 0.0210328730 0.1648886499 -0.0821763581 -0.0278928736 0.0549154101 0.1145568906 0.0961598833 -0.1246975653 0.0032456048 -0.0650868483 -0.0692431254 0.0157111906 0.0385500182 -0.0183418730 -0.0248078667 0.0618620122 -0.0271796502 -0.0762739427 -0.0367521929 -0.0600969236 -0.0374279148 -0.0346525393 -0.0957460001 -0.0872363181 -0.0011955586 -0.1062775229 -0.1122277029 -0.0131566525 0.0079386626 -0.1301781546 -0.0660205150 0.0592130116 -0.1065416518 0.1210263798 -0.1247593284 0.0376007684 0.0295137770 -0.2191428478 -0.1006634607 0.0339015902 -0.3012846237 -0.0848210020 -0.0193672549 0.0329629480 -0.0020853080 -0.0146159685 0.0309043146 -0.0169432984 -0.0022641903 0.0087144860 -0.0192737384 0.0154888129 -0.0099218639 -0.0002890400 -0.0043875797 -0.0012510850 0.0005332005 0.0000214954 0.0019685413 -0.0009893887 -0.0028214876 0.0012002636 -0.0012648704 -0.0003725749 -0.0004090173 -0.0006442792 0.0022943210 -0.0097909765 -0.0001108656 0.0035210842 -0.0126306719 -0.0096874456 -0.0026599810 -0.0017668980 0.0011404411 0.0009053284 -0.0073606767 0.0079255658 -0.0114561182 0.0028594872 -0.0055574954 0.0199241251 0.0176535553 0.0082234909 0.0026126339 -0.0248633560 -0.0166320328 -0.0219263794 0.0087208358 -0.0021315908 -0.0008183822 0.0001125948 0.0029122985 -0.0004496901 -0.0008235087 0.0022310692 -0.0013857775 -0.0046975065 -0.0027043276 0.0068870547 -0.0137891913 -0.0110726928 0.0030418001 -0.0040096323 -0.0110449539 0.0012405765 -0.0070496723 -0.0073473017 -0.0309831442 -0.0501906969 0.0409234677 0.0047760932 -0.0029060045 -0.0183321509 0.0095571646 0.0103828894 -0.0318059948 -0.0149177490 -0.0500105089 0.0296120895 0.0002076704 0.0181768462 -0.0315522983 -0.0120841040 -0.0032725934 -0.0103829382 0.0287306888 0.0419161118 -0.0603844517 0.0378053423 0.0700219531 -0.0899152398 0.0032913690 -0.0086372953 0.0325357880 0.0212963037 0.0850270125 -0.0900312053 0.0088187956 0.0467042260 -0.0517456876 -0.0040117289 0.0007589267 0.0049262565 0.0091412335 -0.0199829047 -0.0019640171 -0.0064801809 0.0210406970 -0.0122766647 0.0132085560 -0.0105470288 -0.0000733713 0.0009291262 0.0024145187 0.0075440750 0.0027332158 -0.0325502767 0.0164484254 0.0229314936 -0.0627899221 0.0029704028 -0.0070340097 0.0110733376 -0.0010891345 0.0410478097 -0.0454045677 0.0090036289 0.0224859598 -0.0266004827 0.0228665303 -0.0216069460 0.0204029525 0.0080021086 0.0327189005 0.0055097246 0.0003686177 0.0045180083 -0.0010481525 0.0066629355 -0.0066960403 -0.0058017688 0.0020248507 -0.0151132315 -0.0024336836 -0.0228014797 0.0104389846 0.0049981694 0.0053543312 -0.0088896351 -0.0053085684 0.0012522930 -0.0076300294 -0.0034695986 0.0169972451 0.0057292468 0.0022196121 0.0211993081 -0.0065081763 0.0149725006 0.0440795239 0.0092275824 0.0005265567 0.0149876329 0.0042275325 -0.0160899149 -0.0151171810 0.0006819502 0.0059256344 0.0286540565 0.0045903255 -0.0176387932 -0.0373581624 -0.0381639849 0.0155723418 0.0245033943 -0.0210323160 0.0086490540 0.0159991950 0.0162098948 -0.0109599937 -0.0031158530 0.0069830097 0.0042950495 0.0062359133 0.0764431032 -0.0392111289 -0.0385581529 0.0409259152 -0.0079755153 -0.0219638746 0.0282677374 -0.0068650308 -0.0088228171 -0.0100412720 0.0143088026 0.0194926755 0.0873617399 -0.0363156360 -0.0421116193 -0.0037017733 0.0087944434 0.0150558992 0.0219210864 0.0070083605 0.0043559985 0.0457838409 -0.0189752841 0.0237748406 -0.0016728281 -0.0422729916 0.0109303411 0.0728873670 0.0401704549 0.0200164675 -0.0262641449 0.0057906309 0.0114144893 -0.0565881766 0.0236805756 0.0407479888 0.0077272668 -0.0290444042 0.0056782407 -0.0285191658 -0.0164632872 0.0427027988 0.0071487167 0.0099950260 0.0144105380 -0.0125656253 0.0174272598 -0.0618065651 -0.0223244087 0.0304384650 -0.0312654794 0.0531661974 -0.0111644886 0.0045206432 0.0818247031 0.0004002505 -0.0485256443 0.0595002651 -0.0353630468 -0.1143094810 0.0117292155 -0.0207491746 -0.0292295230 0.0135686193 -0.0118787901 -0.0603316522 0.0364931115 0.0000764771 -0.0755837958 0.0060258857 -0.0405995542 -0.1091624469 -0.0711052229 -0.0396979503 -0.0203958437 0.0377665110 0.0861220427 -0.0692443016 -0.0220730976 0.0583538226 0.0641380519 -0.0289904556 -0.0850164678 -0.0320821600 0.0976561220 -0.0629876684 0.0119209273 -0.0461352245 0.0196029782 -0.1511740838 -0.0245997306 -0.0233768140 0.0401460615 -0.0259044832 -0.0136408318 0.0258435512 0.0550295080 -0.0351783955 -0.0067051788 0.0037293424 -0.0066677460 -0.0251458708 -0.0348123584 -0.0240982854 0.0061307674 -0.0033485469 -0.0051010155 -0.0038628630 0.0359529496 0.0092954170 -0.0115560571 0.0021193956 -0.0592819919 -0.0516768008 -0.0470910801 -0.0179552884 -0.0082532989 -0.0263788328 0.0573663534 -0.0189474164 0.0276317596 -0.0199592593 -0.0495312045 0.0619816298 -0.0359597586 -0.0002899910 0.0939815853 -0.0656464943 0.0414998683 -0.0082687813 -0.0256954404 -0.0400975200 -0.0253227231 0.0447256299 -0.0062584272 0.0035923386 0.0143354970 0.0030944686 -0.0290203163 -0.0074724059 0.0090649863 -0.0135977531 0.0028020019 0.0259115309 0.0111385157 0.0258651068 0.0141821047 -0.0113643371 0.0273133589 0.0531483692 -0.0099360772 0.0032658573 0.0501800901 0.0252688588 -0.0161203458 0.0504479568 0.0240525302 0.0021140732 0.0458250164 -0.0273279014 0.0475449906 -0.0168417349 -0.0685267040 0.0701052223 0.0371008538 -0.0783208138 0.1214039058 0.0249372982 -0.0651871186 0.1000452467 -0.0011867480 -0.0017071527 -0.0110127207 0.0082159497 -0.0070305499 -0.0033238802 0.0070914046 -0.0083619425 0.0014502769 -0.0008919395 0.0079423822 0.0044945203 -0.0016375380 0.0035307825 -0.0000568821 0.0008708245 0.0072108853 0.0001908269 -0.0035387305 0.0012072274 0.0020416963 0.0009955173 -0.0113342314 -0.0026471276 0.0018796845 0.0018577836 0.0015172991 0.0002890674 -0.0012199154 -0.0061053459 0.0035363059 0.0052881349 -0.0095291140 0.0083043085 -0.0060039636 0.0025177152 -0.0017453760 -0.0052278454 -0.0084297544 0.0025046579 0.0014097663 0.0210599456 -0.0010073883 -0.0015375174 0.0033707300 -0.0038275178 -0.0016211181 0.0000125904 0.0040263562 -0.0010122400 0.0053616028 0.0089466499 -0.0011541847 -0.0067476633 -0.0034580330 0.0070319935 -0.0036231699 -0.0046350076 0.0050330962 0.0126223377 0.0065464508 0.0078613701 -0.0043502544 -0.0053258911 -0.0615584733 -0.0927906786 0.0947967742 0.0033534437 0.0006236196 -0.0129706638 0.0157429006 0.0272286486 -0.0584850245 -0.0321220260 -0.0978267740 0.0600230577 -0.0038435495 0.0440767728 -0.0585166618 -0.0236252611 0.0032743396 -0.0028392762 0.0745441231 0.1061953690 -0.1082547040 0.0736418027 0.1636875676 -0.1848785246 0.0033265758 -0.0244352932 0.0519370306 0.0325187501 0.1867485520 -0.1867117572 0.0180230175 0.1187101786 -0.0914298437 -0.0203636038 0.0018877402 0.0228913826 0.0204414512 -0.0588679563 -0.0059817627 -0.0234866182 0.0694920038 -0.0402740282 0.0383479987 -0.0363738547 -0.0004397933 -0.0056870136 0.0057058919 0.0303843438 0.0033237160 -0.1122630872 0.0624845905 0.0622402461 -0.2013702395 0.0052866617 -0.0147909768 0.0343562094 -0.0048063525 0.1310341705 -0.1484131698 0.0283359292 0.0654599991 -0.0843578804 0.0826843359 -0.0217932698 0.0323762416 0.0102408379 0.0535187607 0.0074009837 -0.0038296532 0.0130503043 -0.0018888206 0.0177262610 -0.0138259627 -0.0160894854 0.0070207611 -0.0324525602 0.0111733491 0.0173017753 0.0426187831 0.0211966894 0.0634491533 -0.0513180875 -0.0237438730 -0.0259663275 -0.0447222233 -0.0013327489 0.0557055923 -0.0430804019 -0.0534102683 -0.0976341542 -0.0539595730 0.0281545489 0.0668043351 0.0169124404 -0.0319087037 -0.0011481429 0.0063792533 -0.0291713625 -0.0104992893 -0.0286558783 -0.0550702435 -0.0649960361 0.0160835646 -0.0228387527 -0.0978666366 -0.1193706065 0.0440950199 0.0717397606 -0.0885204620 0.0366540888 0.0659506093 0.0554295707 -0.0445530060 -0.0127991665 0.0078918143 0.0204357021 0.0308041111 0.2587066692 -0.1393166470 -0.1307385590 0.1036697864 -0.0083120512 -0.0581153212 0.0867705683 -0.0154387328 -0.0206131636 -0.0144635867 0.0407071930 0.0594159785 0.2947808536 -0.1192429071 -0.1377050901 0.0391980498 0.0063664459 0.0238613507 -0.0114883186 -0.0084954314 0.0029933886 -0.0166706782 -0.0022150594 -0.0018035269 -0.0068364009 0.0002989036 0.0052526895 -0.0167261840 -0.0161523513 -0.0020903360 0.0009766901 0.0049543073 -0.0061069191 0.0215964305 0.0011080680 -0.0224145523 -0.0206014853 0.0217459946 -0.0078953948 0.0065132013 0.0094930927 -0.0134139109 0.0297674751 0.0681276423 0.0268030773 0.0965312085 0.1282788432 0.1968358535 0.0281443289 0.0733888799 0.0446326822 0.0293175394 0.0582269664 0.0654746316 0.0550243473 0.0359233239 -0.0500851684 -0.0515304877 0.0654620056 -0.0508448374 -0.0704848580 0.0562398580 0.0333989418 -0.0527200938 0.0893925862 -0.0121442982 -0.0265941286 0.0600105117 -0.0370777657 -0.1693542228 0.1312808349 0.0111760084 -0.0158409166 0.0275498048 -0.0710382497 0.0897214323 -0.0307498598 -0.0377422939 -0.0373067474 -0.0199234343 0.0375628055 -0.0508343742 -0.0408328106 0.0227726317 0.1187233340 -0.0131229055 0.0188175462 -0.0029212289 0.0208763213 -0.0828162941 0.0002926511 0.0051513971 0.0040507275 -0.0025505815 0.0012517104 0.0071296260 0.0026626044 -0.0159397760 0.0050544938 -0.0029133322 0.0049385830 -0.0002318425 -0.0055391276 -0.0098924057 -0.0021270981 -0.0115282354 -0.0131956877 -0.0000262327 -0.0060884006 -0.0044213794 0.0017910047 -0.0040951372 0.0052497778 -0.0025225083 -0.0002526104 -0.0115668635 -0.0151276185 -0.0204705017 -0.0081828592 -0.0135507668 0.0222093718 0.0106670572 -0.0191339919 0.0393314552 0.0045368704 0.0032477378 0.0685530242 -0.0202874935 0.0203925736 -0.0140134083 -0.0062240825 -0.0216000076 -0.0054436814 0.0118284523 -0.0111387937 -0.0072342543 -0.0013875491 0.0025502585 -0.0136001393 -0.0059749271 0.0016365893 0.0030306698 -0.0013865900 0.0118094371 0.0050126156 0.0065516182 0.0089546235 -0.0081421979 0.0015969308 0.0301049371 -0.0015473423 -0.0127208893 0.0273397439 0.0229506758 -0.0103987194 0.0313076133 0.0146925258 0.0065484762 0.0327844579 -0.0062252890 0.0135945077 -0.0172924860 -0.0331886287 0.0174635711 0.0075551963 -0.0418240363 0.0408120090 -0.0153920508 0.0525391338 -0.0999755130 0.0115720839 0.0012133289 -0.0028576470 0.0055897969 -0.0005712955 -0.0007567122 0.0028569076 -0.0008094225 -0.0010906237 -0.0013748081 -0.0004622249 0.0000980004 0.0004919138 0.0016990614 0.0002033586 -0.0036507183 0.0000684728 0.0012630715 0.0001325178 -0.0002531590 -0.0009249795 -0.0007142774 -0.0017109512 -0.0013233453 -0.0004570486 0.0007927300 -0.0005957661 -0.0005449499 0.0063359361 0.0010365673 -0.0024772387 -0.0010810088 -0.0006662993 0.0060140476 -0.0027805336 -0.0046805130 -0.0092922159 -0.0125449489 -0.0081217231 -0.0064055008 -0.0033457182 0.0176007132 0.0039171408 0.0066795910 -0.0025117356 0.0017076425 0.0008310946 -0.0001879353 -0.0016992724 0.0004768182 -0.0020572137 -0.0034309230 0.0007592277 0.0014925924 0.0005066205 0.0019283290 -0.0018592410 -0.0017322562 0.0014896544 0.0015291246 0.0006609109 0.0020088576 -0.0024247388 -0.0017391608 -0.0048529084 -0.0211448246 0.0098534921 0.0202514539 -0.0441367026 -0.0206048154 0.0206054198 -0.0254413070 -0.0570169727 -0.0035632841 -0.0239767985 -0.0236741270 -0.0133967789 -0.0140453284 -0.0556582419 -0.0248519572 -0.0245211781 -0.0161696022 0.0529745456 -0.0367550031 -0.0191965217 0.0511880242 -0.0056849895 -0.0994079421 0.0112642364 0.0345068291 0.0631639923 -0.0302454659 -0.0020261288 -0.0733592036 -0.0396256103 -0.0135637916 -0.0073051423 0.0232364397 -0.0312291564 0.0202058909 -0.0518875501 0.0816425039 0.0389615347 -0.0068780621 -0.0401793780 0.0498976153 -0.0864877355 0.0490434120 0.0263501667 -0.0199200127 -0.0528268587 0.0065617675 0.0190451969 0.0546443155 -0.0094695455 -0.0854921808 0.2230679898 0.0364075093 0.0492800524 -0.0421887419 -0.0482320325 -0.1977630296 0.1643388593 -0.0013941277 -0.0901160898 0.0118549473 -0.0510647062 -0.0882228264 0.0449013191 0.0382414463 0.0836993915 -0.0015629746 0.0228745443 -0.0480720962 -0.0400669572 -0.0628714451 0.1039247262 0.0441306355 0.0008859791 -0.0458713297 -0.0749901903 -0.1633147838 0.0116593754 -0.0304608898 -0.0330543685 -0.0462046340 -0.0030145724 0.0064248027 -0.0477854661 0.0132662249 0.0557879800 -0.0150613601 0.0781480923 0.2120214069 -0.0211410978 0.1012513601 0.2504140268 0.0229081161 0.0006628038 0.1057505757 -0.0300426624 -0.0417775877 -0.0876663941 0.0611241469 0.0583374191 0.2582900408 -0.0136799363 -0.0217064271 -0.1384635047 0.0463515707 -0.0592671826 -0.0392923417 0.1146909271 -0.0670061524 -0.0461800635 -0.0642050271 -0.0135045623 0.0308148998 0.0412313848 -0.0237163768 -0.0256138016 -0.2310201461 0.0590364798 0.1173777064 -0.0088525931 0.0248560472 -0.0333828205 0.0101758960 0.0070450741 0.0506861757 0.0230112162 0.0113312029 0.0396057117 -0.1438135948 0.0954113474 0.1619954061 -0.0810678722 0.0941785211 0.1139600787 -0.0001387379 -0.0021134404 0.0010161915 0.0020260789 -0.0000091922 -0.0007892960 -0.0004718328 -0.0027417221 0.0001307788 -0.0011201891 -0.0042328005 -0.0004630269 -0.0040377262 -0.0013411190 -0.0013999438 0.0051840080 0.0025537327 -0.0067962358 -0.0122086063 0.0021311049 -0.0047084959 -0.0084530499 0.0008800155 -0.0030725669 0.0010560909 0.0007755787 -0.0092149557 0.0075130449 0.0029674016 0.0020317167 0.0025710036 0.0014872041 -0.0025567800 -0.0022732936 0.0011373563 -0.0023267978 0.0003894002 0.0006817489 -0.0110818101 -0.0023295937 0.0008538231 -0.0092072987 -0.0093538640 0.0034266592 -0.0002816652 -0.0038760727 0.0083524733 -0.0004949268 -0.0025192237 0.0051911475 -0.0029586174 -0.0166833311 0.0137299177 0.0033787379 -0.0031515465 -0.0008710044 -0.0073348518 0.0012787449 0.0047297544 0.0065020488 0.0000202567 0.0028064955 0.0057571629 -0.0013223267 -0.0058361239 0.0000368108 0.0148293373 -0.0125728826 -0.0004678209 0.1987132288 -0.1358451858 0.2487219918 -0.0468855625 -0.0071881637 -0.0324559682 -0.0290791740 -0.0254693029 0.0089630077 0.0606306638 -0.0265178082 0.0035328879 -0.0081627990 -0.0155026954 -0.0180544090 -0.0176680610 -0.0493691622 0.0196340888 0.0064862955 0.0003449869 -0.0360710096 0.0712714451 0.0133566354 0.0343613851 -0.0544129846 -0.0494457005 -0.1226763055 -0.0376082967 -0.0405669511 0.0219491175 -0.0376335690 0.0769269656 -0.0809809901 -0.0136470845 -0.0245501461 -0.0284602013 -0.0807897981 0.0152315189 -0.1173575231 -0.1663079409 0.0927873455 -0.2179807563 0.1056735101 -0.0402041617 0.2424752356 0.0575674271 -0.0157835937 0.1529905116 0.0065844222 0.0061398378 0.0273304562 0.0150548507 -0.0147078846 0.0350767273 -0.0579014856 0.0035368875 -0.1142008119 -0.0535906880 0.0228782000 -0.1023337758 -0.0974763918 0.0437270451 -0.2057014934 -0.1056452003 0.0293996922 -0.2263030640 -0.1755286553 0.0337073069 -0.3949394596 -0.1713310373 0.0600736779 -0.3856402074 0.0955921641 -0.0182100401 0.2147240869 -0.0269909783 0.0749716728 0.0044278595 -0.0288278257 0.1174893468 0.0177078149 0.0008304605 -0.0017579181 -0.0003425949 -0.0129698130 0.0179739319 -0.0219933064 0.0144938411 0.0055978014 -0.0135483921 0.0087996125 0.0170594149 0.0131909186 -0.0075171757 -0.0033739733 0.0008273893 -0.0022089365 0.0016810075 -0.0015637425 -0.0024176105 -0.0003283488 0.0014901387 0.0000183627 -0.0027306907 -0.0029147582 0.0235604715 0.0067922383 -0.0072420141 -0.0007411611 -0.0032363508 -0.0029406258 0.0035910091 -0.0004239002 0.0014352696 -0.0057957895 0.0075517801 0.0017649777 -0.0018990176 0.0012457462 -0.0016535723 0.0166034200 0.0130231795 0.0065874044 0.0044903920 -0.0277327296 -0.0052134137 -0.0146468869 0.0096026565 -0.0027066273 -0.0055741413 -0.0084982727 -0.0050705992 -0.0037826403 0.0031664606 0.0053493735 -0.0055791287 -0.0077601530 -0.0062574719 -0.0122946039 0.0085066173 0.0084317161 -0.0061491959 -0.0261420324 -0.0132458232 -0.0098819930 0.0080645084 0.0055956802 -0.0019438633 -0.0031554717 0.0089980246 0.0018412795 -0.0030160937 0.0043385229 0.0021728463 -0.0022509208 -0.0101810833 -0.0020483977 -0.0071983166 -0.0024402839 -0.0022603445 0.0006208802 -0.0101592395 -0.0024144035 0.0001820374 0.0037647860 0.0144643227 0.0037228251 0.0008155855 0.0112456496 0.0061085289 -0.0240534915 0.0022618616 0.0022772798 0.0100511306 -0.0068660559 0.0084116541 -0.0195555120 -0.0050943681 0.0094776435 0.0024835570 0.0014193822 -0.0022338642 0.0005994943 -0.0010535474 0.0017506287 0.0013015425 -0.0006366848 0.0002598838 0.0009299405 -0.0026490505 0.0018836747 -0.0000395489 0.0002712163 -0.0030782958 -0.0000297349 0.0009488205 0.0000985807 -0.0002296280 -0.0015534266 0.0061032199 0.0018887225 0.0018261758 -0.0010331476 -0.0007338232 -0.0059976925 0.0053958861 -0.0009032865 -0.0011762242 -0.0025062326 -0.0014383131 -0.0083516646 0.0043599199 0.0042303134 0.0092237857 0.0010516325 0.0024942259 -0.0018931933 -0.0010734701 -0.0016973081 0.0026853859 0.0013731489 -0.0004529667 0.0009292007 0.0000720094 0.0065943525 0.0014536411 0.0000156098 0.0068702917 -0.0021946531 -0.0021577525 -0.0031407823 -0.0003321102 0.0021700898 0.0023409805 -0.0064816438 -0.0070669920 -0.0156096831 -0.0017168492 0.0020360253 -0.0019284964 0.0008818858 -0.0029252192 -0.0031394604 0.0007994362 0.0012220533 0.0001900290 -0.0002152705 -0.0068839968 -0.0133953309 0.0009543894 0.0007512829 -0.0064989784 -0.0027622079 -0.0019498007 -0.0021041646 0.0122544534 -0.0055683251 -0.0039745758 -0.0078977821 -0.0022454493 0.0046517749 0.0071931015 -0.0051190000 -0.0028045004 -0.0164380023 0.0028223019 0.0117869872 0.0102708571 -0.0027881621 -0.0109008156 0.0063083446 -0.0000564540 0.0041695021 0.0002016838 0.0029733282 0.0104412989 -0.0050201028 0.0054910693 0.0106573235 -0.0133307468 0.0128315693 0.0199050454 0.0078756449 -0.0006368284 -0.0019959739 0.0123057224 -0.0076022360 0.0033588136 -0.0034229160 -0.0255206448 0.0104605879 0.0385580585 0.0079559856 -0.0000356586 -0.0133519919 0.0069511518 0.0100103307 -0.0345086193 0.0266953549 0.0334908885 0.0118386344 -0.0163464875 0.0085983707 -0.0006978522 -0.0111023605 0.0314757142 -0.0163251797 -0.0400865237 -0.0672260314 -0.0248454210 -0.0237663852 -0.0379266718 -0.0079421265 -0.0202022886 -0.0254447196 -0.0535502680 -0.0162429392 -0.0325050573 -0.0295835429 -0.0072106802 -0.0456019678 -0.0294317911 -0.0363275333 -0.0383150612 -0.1171524105 0.0201068434 0.0143391150 -0.0302733699 0.0844181465 0.0673299185 -0.0387772001 0.0203597684 0.0489559774 -0.1366851146 0.1747870489 0.1734812491 0.0178603879 -0.0469780638 -0.0790975378 -0.0468046332 0.0633807849 0.0493894603 0.0547332301 0.0348229883 0.0355043059 -0.0076754844 0.0156695332 -0.0673239928 -0.0410754301 -0.0559221021 0.0298541467 -0.0123519693 0.0092463236 -0.0511600935 0.0031152128 0.0125459680 0.0023862917 -0.0002599057 0.0089585711 0.0046075197 -0.0008070791 -0.0071153677 0.0028975343 -0.0034865049 0.0080775388 0.0029943763 -0.0015773835 -0.0020308503 -0.0002467469 -0.0069831509 -0.0069091501 0.0012281774 -0.0036147593 0.0044526275 0.0027368910 -0.0030189583 0.0117257678 0.0063175392 0.0049372812 -0.0044891425 -0.0089812444 -0.0112137757 -0.0063622180 -0.0055484835 0.0064051952 0.0005995969 -0.0049442294 0.0198662017 -0.0016864539 0.0092806038 0.0350707930 -0.0153667977 0.0262716557 -0.0084119917 -0.0015501690 -0.0176190194 -0.0052025613 0.0060079329 -0.0096348417 -0.0021568029 0.0002572013 -0.0012230881 -0.0058395000 -0.0020649091 -0.0014852714 0.0021293996 -0.0012629201 0.0086408905 0.0042092213 0.0020964875 0.0074987490 0.0018252691 -0.0000989592 0.0196411505 0.0040427127 -0.0074044434 0.0196422585 0.0137089931 -0.0050932889 0.0293625452 0.0131214585 -0.0011021368 0.0291553974 -0.0058711005 0.0067331654 -0.0126508147 0.0044614655 -0.0011111604 -0.0088320146 0.0177755282 -0.0284683915 0.0652593002 0.0317071836 -0.0419928971 -0.0014367688 -0.0025942708 0.0015827056 0.0022423207 -0.0018976328 0.0012759333 -0.0007836731 0.0009992003 -0.0008678069 -0.0014745885 0.0021246339 0.0020406271 -0.0020102629 0.0000494601 0.0012462538 0.0047937706 0.0024868783 -0.0030780080 0.0004879544 0.0005618200 0.0008083802 0.0000100239 -0.0030852240 -0.0026015404 0.0000620671 0.0012530851 -0.0026793963 -0.0019352591 -0.0074843901 -0.0008046089 0.0032549491 0.0030039132 -0.0031656664 0.0014270384 -0.0017892404 0.0049007692 0.0066258130 0.0113427152 0.0039352975 0.0149520545 0.0032551289 -0.0097161621 0.0002024299 -0.0090929990 0.0062711997 -0.0043210520 -0.0007433422 0.0003206845 0.0030972313 -0.0006408961 0.0025123335 0.0049742796 -0.0011762957 -0.0052161574 -0.0029918666 0.0033147931 -0.0042590823 -0.0034407139 0.0023377413 0.0022917009 0.0002298526 0.0029162240 -0.0039069999 -0.0033548660 -0.0448993054 -0.0786914195 0.0930967950 -0.0013223319 0.0100132870 0.0261413341 0.0214089619 0.0460180245 -0.0279802759 -0.0187371946 -0.0819236213 0.0688817721 0.0305821089 0.0489328723 -0.0295143516 0.0140906129 -0.0018630913 0.0338808308 0.0521105504 0.1081802018 -0.0654131572 0.0742227657 0.1783108427 -0.1473388478 -0.0156816131 -0.0453531528 0.0042248286 0.0849474063 0.2023543022 -0.1612680130 0.0660312004 0.1067852812 -0.0611271913 0.0085264012 -0.0008101002 -0.0318575596 0.0059676769 0.0131997448 -0.0264442353 0.0262533480 -0.0462708797 0.0041224269 0.0100590805 0.0091054463 -0.0225458346 0.0182831841 0.0112256259 -0.0290860791 -0.0308569510 0.0722050140 -0.0557991749 -0.0281747895 0.0906930178 -0.0459514390 -0.0126811995 -0.0054388890 0.0363966473 -0.0225558974 0.0795313042 -0.0431389507 -0.0231869173 0.0838321557 -0.0534050148 0.0224702949 0.0004263557 -0.0190585345 -0.0290471935 0.0152528730 -0.0136424449 0.0226120589 0.0281874822 0.0234909500 -0.0476858196 -0.0105315297 -0.0044280466 0.0281031573 0.0345733325 0.0970727141 -0.0127207954 0.0081170034 0.0371608952 0.0348442131 -0.0157945008 -0.0129597452 0.0568959796 0.0061669717 -0.0249676601 0.0010294967 -0.0710862651 -0.1545580693 0.0367335688 -0.0294916304 -0.1326960813 -0.0019893730 0.0038113038 -0.0746147927 0.0360440090 0.0312392075 0.0350306025 -0.0139480267 -0.0371388593 -0.1794902537 0.0181427755 0.0046269915 0.0470976140 -0.0167947156 0.0115072598 -0.0293071284 0.1870595843 -0.0575288599 -0.0872490162 -0.1081283565 0.0324107046 0.0547035819 0.0941715977 -0.0886532346 -0.0667927644 -0.2261509941 0.1113954381 0.1704571120 0.1639697132 -0.1087792395 -0.1326819600 0.0482211253 -0.0193961504 0.0100586513 -0.0532020469 0.0185824211 0.0950846001 -0.1479271352 0.0617988733 0.0904553341 -0.2680553478 0.1561431299 0.2399016034 -0.0007655833 -0.0013672833 0.0002097502 0.0039856606 -0.0009902512 -0.0004012143 -0.0033459418 -0.0064351303 -0.0002315310 0.0023792139 -0.0013552628 -0.0004621727 -0.0049585160 0.0014821291 0.0005453705 -0.0032628696 0.0053917835 0.0009989769 -0.0065036604 -0.0012160289 -0.0052550138 -0.0084536309 -0.0003998182 0.0039927423 -0.0179320248 -0.0206025695 -0.0144112244 -0.0156480402 0.1347564692 0.3144650098 -0.0216926470 0.0505680622 0.0979468972 0.0220349925 0.0536996078 0.1095258612 0.0192550171 0.0011412588 0.0103640446 0.0622828146 -0.0186238054 -0.0304415922 -0.0004971454 0.0241283669 0.0453872026 -0.0408072257 0.0127369788 0.0059615941 0.0469862705 -0.0273210614 -0.0461168555 -0.1468158337 0.0848486306 0.0816594183 -0.0491350321 -0.0517178523 0.0338409171 0.0092422742 0.0142690668 -0.0167997019 -0.0051247024 0.0337525499 0.0023907843 0.0172295262 -0.0241364600 -0.0099241217 -0.0109085311 -0.0121284256 -0.0125171275 0.0054737120 -0.0066870839 0.0133465552 -0.0008160030 -0.0018985520 0.0028638011 -0.0008188888 -0.0004759327 0.0008649065 0.0041490271 -0.0006641469 0.0000849953 0.0003993363 -0.0005086248 -0.0028693589 -0.0009412307 0.0000382183 0.0011687042 0.0011497752 0.0016806937 -0.0008941577 0.0042451342 0.0006348134 0.0007454379 -0.0000060491 -0.0039317054 -0.0050067005 -0.0022085112 0.0005913839 0.0018022919 -0.0004761565 0.0058580171 -0.0020316803 -0.0022920137 -0.0028899181 -0.0002402456 -0.0061688827 -0.0009344321 -0.0058774057 -0.0121458837 0.0042808353 -0.0106034706 0.0067352987 -0.0024155578 0.0134966125 0.0029646363 -0.0006377530 0.0080904091 0.0012403318 0.0003048507 0.0001541050 0.0008403443 -0.0003419518 0.0023369438 -0.0041079519 0.0012885808 -0.0079798561 -0.0014526105 0.0006398954 -0.0051941667 -0.0048690523 0.0025083666 -0.0139198405 -0.0061075496 0.0009424279 -0.0123352879 -0.0105459228 0.0032420576 -0.0219520282 -0.0073876067 0.0017217920 -0.0195475913 0.0042502624 -0.0014635077 0.0123158968 0.0005558988 0.0018532349 0.0007821088 0.0002414536 0.0000141971 -0.0104509680 -0.0219527664 0.0329473451 -0.0035616061 -0.0026076176 0.0009978364 -0.0010782540 0.0018988152 0.0008434670 -0.0015704528 0.0013579941 0.0026131124 0.0020264811 0.0003437129 0.0005155179 -0.0007170364 -0.0011354541 0.0017490968 0.0003331633 0.0000482611 -0.0012945450 0.0001339338 0.0003239208 -0.0000311381 -0.0005657722 0.0027717993 0.0002614631 -0.0010731552 0.0003483410 -0.0012900413 -0.0009343494 -0.0022581347 -0.0012860117 0.0016301792 -0.0005834004 0.0004067393 0.0004639955 -0.0032801251 0.0048464929 0.0016236848 0.0038922920 0.0016490007 0.0072184952 0.0002817596 -0.0014448593 0.0030096789 -0.0047565741 0.0033668161 -0.0025246013 -0.0011661043 -0.0009260040 0.0016489601 -0.0007616460 0.0013384943 0.0042041095 -0.0016210340 -0.0054535089 -0.0033559646 -0.0007829511 -0.0000733943 0.0002463057 -0.0001836220 -0.0033946779 -0.0019383932 -0.0006653229 -0.0000545654 0.0000350543 -0.0352665848 -0.0639634578 -0.0081200609 -0.0476183419 0.0468172335 -0.0181896370 -0.0138867196 0.0973179869 0.1251952545 0.0151155392 0.0098764545 0.1308229580 0.0999773008 0.0688159668 0.1105450683 0.0680880382 -0.0201373755 -0.0027515429 -0.1139092598 0.1222929113 -0.1232280062 -0.0903070996 0.2168608272 0.1496078773 -0.0456773681 -0.1021625207 -0.1348128475 0.2630867029 0.1625300034 0.0781251635 0.1840332942 -0.0303640099 -0.1110589625 -0.0005742013 -0.0022335639 0.0190155320 -0.0016412595 -0.0078230380 0.0178422151 -0.0231637133 0.0338150948 -0.0034046256 -0.0145781558 -0.0120696082 0.0146691854 -0.0219477401 -0.0108393494 0.0157436251 0.0244962113 -0.0583442162 0.0377797555 0.0262029526 -0.0606056286 0.0364710277 0.0119348030 0.0049253412 -0.0281081744 0.0070259303 -0.0659439699 0.0309594124 0.0018141981 -0.0665217716 0.0261343371 0.1802601453 -0.0953653075 -0.1013304936 -0.2222334415 0.0206631957 -0.0557002450 -0.0139520997 -0.0205529711 -0.0189116375 0.0397225794 0.0099722584 0.0042900178 -0.0432795679 -0.0488795315 -0.1637831296 -0.0021150945 -0.0122211474 -0.0600999178 -0.0006135298 -0.0153871135 0.0030232169 0.0102340889 -0.0035064470 0.0368920905 0.0572778770 0.0680076806 0.2141466426 0.0346067663 0.0879235802 0.2268258913 0.0293165461 0.0376242938 0.0784107561 0.0122133087 -0.0445616444 -0.0757923382 0.0576785884 0.1042100133 0.2551670462 0.0104710853 -0.0461296896 -0.0655083660 0.0154098764 -0.0023655219 0.0188899228 0.0138635504 -0.0243900466 -0.0300028410 0.0009539245 0.0242202710 0.0089389629 0.0260167412 0.0112393184 -0.0127955384 -0.0300371856 0.0264846603 0.0021177720 0.0430927576 -0.0121987550 0.0007839511 -0.0050936001 -0.0077883466 -0.0294417449 -0.0324305988 0.0141916568 -0.0244700893 -0.0130004679 0.0074259904 -0.0041516668 -0.0770742952 0.0196119981 0.0002566215 -0.0013169551 -0.0018419606 -0.0002595135 0.0011576436 -0.0017509508 -0.0004740249 -0.0031703138 -0.0055260918 0.0002655660 0.0016899684 -0.0017371835 -0.0007001637 -0.0024346311 0.0017289238 0.0009832482 -0.0037494879 0.0030986073 0.0023738250 -0.0006367284 0.0006878061 0.0012491368 0.0015503610 -0.0002198677 0.0027790645 0.0050529360 0.0231656340 0.0422291439 -0.0349478644 -0.1109047816 -0.3380184930 -0.0167795575 -0.0161877033 -0.0923371345 0.0189462541 -0.0137169007 -0.0538714115 0.0187806020 0.0521997007 0.0928281902 -0.0681166393 0.0736353538 0.0247878252 0.0189033274 0.0032539884 -0.0357954993 0.0125814371 -0.0007386971 -0.0619815325 -0.0751062347 0.0983872549 0.0082030365 0.1070539534 -0.1070063289 -0.1983526759 -0.0058846667 -0.0443860670 -0.0377534589 -0.0186392032 0.0654960767 -0.0552523515 0.0338694899 -0.0590370653 0.0152939721 -0.0341518814 0.0162815435 -0.0171118801 0.0159862803 0.0086283029 0.0482749576 0.0152261489 -0.0009175003 -0.0337440504 0.0103868820 0.0125784675 0.0046050989 -0.0005003759 0.0028786292 0.0088708103 -0.0006040077 -0.0115490761 0.0053563712 -0.0112441601 0.0082997796 0.0055163485 -0.0048565579 -0.0127221507 -0.0052882503 -0.0051577251 -0.0154329356 0.0004636754 -0.0053275113 0.0078526992 0.0043438769 -0.0161429292 0.0122244525 -0.0020180879 -0.0033013373 -0.0125480994 -0.0233041853 -0.0107540213 -0.0130821035 -0.0077206942 0.0090462663 0.0046990330 -0.0104279599 0.0175318423 0.0078180125 -0.0018521160 0.0293810059 -0.0021331795 0.0043022185 -0.0031505390 -0.0030836827 0.0024509116 0.0020149049 0.0023307775 0.0006525301 -0.0053408825 -0.0025810710 0.0022802372 -0.0058753632 -0.0035824371 0.0016348420 0.0001588336 -0.0001803567 -0.0015911962 -0.0002131258 0.0024495572 -0.0004916507 -0.0092350606 -0.0002460553 0.0041849752 -0.0051307586 -0.0098507139 0.0030055978 0.0040908178 -0.0026379566 -0.0028474256 -0.0003475809 0.0071316362 -0.0004329477 0.0037190290 0.0024964695 0.0026950194 0.0013695086 0.0086743917 -0.0068424250 0.0101341737 -0.0011234306 0.0526939435 0.0047665112 0.0255645480 -0.0523207589 -0.0000636101 0.0015783727 0.0009114296 -0.0012549906 0.0004035609 -0.0000608274 0.0003665371 -0.0018050455 -0.0021205912 0.0000072619 0.0009393331 -0.0009360396 0.0014932008 0.0000538569 0.0002029510 -0.0003362729 -0.0006956180 0.0018347876 -0.0000857368 0.0001776711 0.0003360041 -0.0023153390 -0.0008634800 0.0004408095 0.0001653296 -0.0005408726 -0.0002954463 0.0005658708 0.0001108148 -0.0000332671 0.0006069173 -0.0009921830 0.0044366383 -0.0004817013 -0.0024336703 -0.0025534509 0.0015845979 0.0007584631 0.0051928127 0.0002587515 -0.0043376781 -0.0001075488 0.0010616301 0.0010217739 0.0000251002 0.0008214190 0.0007210513 -0.0009190156 0.0001974575 -0.0000969485 -0.0014560110 -0.0000527797 0.0020599725 0.0011671601 0.0013691815 -0.0013223560 -0.0010051878 0.0007191917 0.0021944495 0.0008214384 0.0011557563 -0.0013632227 -0.0011467350 -0.0237692102 -0.0425907724 0.0122772503 -0.0058243561 -0.0012225040 -0.0119207600 0.0132377878 0.0370555480 0.0278591294 0.0036326564 -0.0157439759 0.0556564658 0.0332484482 0.0370598969 0.0246147866 0.0100742294 -0.0175117534 -0.0001165515 -0.0195108729 0.0303587464 -0.0512999306 -0.0019044178 0.1058498954 0.0110721502 -0.0154669025 -0.0355479252 -0.0293655786 0.1016813414 0.1062384296 -0.0185122673 0.0621453296 -0.0015676472 -0.0576695008 0.0643625325 -0.0141335115 0.0140189940 -0.0190270853 0.0597427512 0.1092661413 -0.0604404683 0.0711389165 0.0627884974 -0.0903748132 0.0248377742 0.0853319981 -0.0065214540 -0.0635090647 -0.0116180113 0.1910355843 -0.0533904591 0.0198558846 0.0628777238 0.0540107044 0.2052046199 0.0541771670 -0.0276998038 -0.1128795396 -0.1711517889 -0.0507151738 0.1185236186 -0.0154151522 -0.1897167768 -0.0584623555 0.0439061010 -0.0212702062 -0.0289142106 -0.0619053372 0.0106663173 -0.0150001906 -0.0980713622 -0.0932989590 -0.1005256520 0.1590715492 0.0438535678 -0.0060193159 0.0047022008 0.0551116784 0.1331528917 0.0135175995 -0.0225279904 -0.0519576359 -0.0140466051 0.0260287463 0.0770988317 -0.0478151519 -0.0489608836 -0.0996330838 -0.0166936066 -0.0061692874 -0.0024680694 -0.0930206859 -0.1183174070 -0.3235377579 0.0005545191 -0.0569881601 -0.0894835579 0.0330776201 0.0322304047 0.1233832966 -0.0242273929 -0.0735991244 -0.1342719851 0.0777592124 0.1131929703 0.2632334170 0.0018748937 -0.0275053221 -0.0109478402 -0.0242626262 -0.0026719215 0.0292289705 0.0028586085 -0.0404616380 0.0045379533 -0.0152581279 0.0158135541 0.0310856009 -0.0051865770 -0.0430762990 -0.0051854637 -0.0618555293 0.0624085125 0.0218172939 0.0024548749 0.0217959391 0.0459338434 0.0595658418 -0.0021823530 0.0199957949 0.0110825928 0.0252636765 0.0576579345 0.1092783282 -0.0195223369 -0.0095544305 0.0024239661 0.0006548174 0.0003636993 0.0044243093 0.0000901647 0.0006622597 0.0006874415 -0.0028183112 0.0002282627 0.0049478031 0.0019091493 0.0009145446 -0.0036779969 -0.0007361483 -0.0010214089 -0.0037965575 -0.0027511125 -0.0019820241 -0.0027111689 -0.0011205980 0.0001854252 -0.0059500004 0.0008035994 -0.0025109955 -0.0201737100 -0.0640215479 -0.1043290811 0.0110643480 0.0258006763 0.2010382745 0.0106033174 -0.0381564997 0.0368906381 -0.0493075954 0.0118031789 0.0354968453 -0.0562231023 -0.0496301645 -0.0750410714 0.0997230553 -0.0524962517 0.0081522353 -0.0097860616 0.0274535802 0.0687224006 -0.0754138107 -0.0241907527 0.0424158801 0.0725872125 -0.0681267599 -0.0452910478 -0.2331493015 0.0976646934 0.1792937082 -0.0364554648 -0.0637646115 0.0918244380 -0.0362430756 -0.0209552174 0.0827774050 0.0208742691 0.0594949221 -0.0270984118 0.0645589434 0.0087682783 -0.0232257177 -0.0901108545 -0.0120597986 -0.0375837276 -0.0401921588 0.0010905355 0.0675245588 -0.0193314688 -0.0384875749 0.0030270183 0.0096506905 -0.0074061864 -0.0150720524 0.0023733531 0.0261989240 -0.0066497952 0.0288849073 -0.0182818695 -0.0211377954 0.0118306880 0.0423105533 0.0106735192 0.0129552756 0.0388576732 0.0085538959 0.0092013218 -0.0203250919 -0.0167459393 0.0368499311 -0.0180708232 -0.0056826924 -0.0034136225 0.0480620282 0.0349408492 0.0245354940 0.0306748142 0.0239842522 -0.0267943281 -0.0113935242 0.0229896734 -0.0407148639 -0.0210062904 0.0097440055 -0.0690321564 0.0021786137 0.0007126389 0.0066217033 0.0082134241 -0.0093232672 -0.0064833270 -0.0056300995 -0.0036060770 0.0130984139 0.0079635410 -0.0065061750 0.0150798897 0.0083395750 -0.0061350751 -0.0003911968 -0.0012812857 0.0050927853 -0.0000522382 -0.0057503881 0.0033992213 0.0250572009 0.0012275486 -0.0068958592 0.0157968393 0.0215970015 -0.0039616061 -0.0091132808 0.0053108790 0.0155341756 0.0026206202 -0.0188904951 0.0089577690 -0.0088567942 -0.0052960334 -0.0080979618 -0.0053051169 -0.0302415532 0.0077017299 -0.0093026587 -0.0204981682 -0.0031493441 -0.0594587649 0.1297707476 -0.0588309742 0.0014915768 -0.0059980695 -0.0045117738 0.0006561860 -0.0022775497 -0.0002569542 -0.0034637430 0.0033581209 0.0034241295 0.0016999582 -0.0000474275 -0.0003340270 -0.0011222974 -0.0002835659 0.0035167068 0.0003100448 0.0002825571 -0.0017320990 0.0005047022 0.0021365114 0.0015294145 0.0019638250 0.0035603182 0.0012941404 -0.0016816360 0.0044980242 0.0033547246 -0.0028715899 -0.0034904748 0.0039272259 0.0004931808 0.0018786995 -0.0040996355 0.0011775727 0.0060202759 0.0092155307 0.0073532123 0.0054459396 0.0014604569 0.0020523840 -0.0074835409 -0.0010882665 -0.0044399993 0.0018474312 -0.0020586744 -0.0010264419 0.0014510856 0.0043077525 -0.0004732177 0.0035760535 0.0059843548 -0.0003395332 -0.0021466961 -0.0004498142 -0.0036454717 0.0059912744 0.0047938092 -0.0028219060 -0.0002990736 0.0012717767 -0.0034775651 0.0058926977 0.0049639810 0.0156207780 0.0293820110 0.0381647178 0.0117606283 0.0083676934 0.0470350593 -0.0055583297 -0.0347071812 -0.0656417350 -0.0154203692 -0.0246966691 -0.0540547936 -0.0349318517 -0.0317223643 -0.0604001931 -0.0049376639 0.0277817621 0.0329841528 0.0671902864 0.0026439642 0.0721518694 0.0559968405 -0.0776861523 -0.1105881491 0.0151831297 0.0313779195 0.0509099629 -0.1213222239 -0.0481379901 -0.0760959465 -0.0620690384 0.0712333695 0.0715523810 0.0392101737 0.0192050348 0.0289852976 0.0200264141 -0.0119388015 0.1052542354 -0.0854921718 0.1435250250 0.0205983012 -0.0476584784 -0.0337190710 0.0843644957 -0.0362768338 -0.0273279765 0.0056174428 0.1983236937 -0.1645454577 0.0842137838 0.1671255263 -0.2064733278 0.2279566463 0.0377224570 0.0088959583 -0.1161707549 -0.0061804953 -0.2824511486 0.1642178940 0.0446349008 -0.2797152277 0.0207303466 -0.0610274248 0.0352911621 0.0359767509 0.0819212701 -0.0073495103 0.0177965593 -0.0822359858 -0.0917007027 -0.0817308376 0.1404662709 0.0274708559 -0.0009223040 0.0297535082 -0.0141659213 0.0026756363 -0.0319741106 -0.0004142610 0.0119852274 0.0421748247 -0.0031646808 -0.0164429797 0.0597622560 0.0205070165 -0.0103976385 0.0118126516 -0.0097705012 -0.0365591150 0.0692975519 0.0013175156 -0.0076210336 -0.0187196048 0.0275833568 -0.0152318502 -0.0064606425 0.0245687011 -0.0084282122 0.0045494750 0.0206485606 -0.0300855805 -0.0333793644 -0.0154567629 0.0006548602 0.0232059653 0.0055574399 0.0331644038 0.0195347747 -0.0526013445 -0.0555028027 -0.0024806509 0.0471036063 0.0310377119 0.0587575607 0.0184598015 -0.0119625846 -0.0589217122 0.0547322334 0.0257835280 0.0963323197 -0.0274474876 0.0091684199 -0.0069229684 -0.0084241292 -0.0559373277 -0.0560286830 0.0266294244 -0.0364740714 -0.0226954000 0.0220705188 -0.0046939958 -0.1465694092 0.0268209015 0.0113241028 -0.0063032786 -0.0022744540 -0.0004267140 -0.0144914352 -0.0021344606 -0.0001239024 -0.0008921954 0.0090820495 -0.0013281637 -0.0149474297 -0.0027130692 0.0007286307 0.0114266573 -0.0025875565 -0.0030267754 0.0037387686 -0.0109809496 -0.0013675580 0.0167531372 0.0021469583 0.0071109986 0.0232920292 0.0003930711 -0.0099991748 0.0081407762 0.0158368669 0.0072663407 0.0074996292 -0.0067488094 -0.0657769524 0.0011218716 0.0107159389 -0.0217794833 0.0164302973 0.0039799827 0.0018866269 0.0177325988 0.0144465578 0.0176554032 0.0177051377 -0.0015347385 -0.0057906845 0.0138859009 0.0000325879 -0.0005462771 -0.0080192965 0.0036862197 0.0062732013 0.0017236007 0.0021996244 0.0009880473 -0.0236733306 0.0133759219 0.0161073896 0.0069076094 0.0114838097 0.0073515808 0.0177457062 0.0007135192 -0.0138624416 -0.0211176412 -0.0105982183 -0.0038112019 -0.0120796606 -0.0094101851 0.0177348110 0.0291474205 0.0066754886 -0.0058347595 -0.0777326074 0.0237023844 0.0653525844 -0.1335571347 -0.0454129508 -0.1215695675 -0.0076414054 -0.0007881852 -0.0746418447 -0.0123611476 0.0501193760 -0.0377137768 0.0913278649 -0.0493776198 -0.0276774278 0.0520048307 0.0724663329 0.0741116927 -0.0083773874 0.0850421158 -0.0051712049 0.0353916050 -0.0735468047 -0.0065260768 0.0942738940 -0.0347348425 -0.0162465044 0.0496730669 0.0696842649 0.1541281063 -0.0118504723 0.0803948400 -0.0163789240 -0.0290435423 -0.0100881356 0.0326215366 -0.0405656163 -0.0411964865 0.0332698509 -0.0764602183 -0.0104420124 0.0156485317 0.0027779086 0.0089951611 -0.0335183615 -0.0156144497 0.0001956078 -0.0142714895 0.0177201159 0.0132875511 -0.0184602338 0.0157253104 0.0119372954 -0.0100674825 -0.0003353466 -0.0002102454 0.0142014604 0.0073209982 -0.0064505024 0.0125599066 0.0405153783 0.0021396393 0.0043716152 0.0308211646 0.0324664226 0.0236143282 0.0038428034 0.0027765900 0.0519061755 0.0234924850 -0.0325680782 0.0503096086 -0.0194153995 -0.0008429151 -0.0170673003 -0.0839952091 -0.0418956158 0.0119078310 -0.1053653226 0.0578861050 -0.0189231212 0.0026543044 -0.0062793417 0.0036067513 -0.0900023303 -0.0313530902 0.0388558967 0.1758004395 0.0364164533 -0.0350099711 0.0600444185 0.1355810456 0.0999746973 -0.0615087374 -0.0290537973 0.0055718405 -0.0724436196 0.0631870708 -0.0211681422 -0.0219730129 -0.0412565224 0.0712366073 -0.0089532316 -0.0610303135 -0.0588598395 0.2579636488 0.0416996576 -0.0940355868 0.0145501765 -0.0613644877 -0.0425374418 0.0095098191 0.0855168280 -0.0193479161 -0.1263856441 0.1986043048 -0.0311758775 0.0159682613 0.0309475497 -0.0056032422 -0.0047263850 -0.0276832078 0.0833686377 -0.0145238999 -0.0408598597 0.1334920925 0.0140337690 -0.0022614230 0.0297805124 -0.0070702249 -0.0616981366 -0.0662682291 -0.0050893639 -0.0707687744 -0.0767763833 -0.0076656166 -0.0516924515 -0.0547642874 -0.0925017190 0.0355476951 0.0539311313 -0.0409223192 -0.3050534954 -0.1547679108 -0.0866251318 0.0157593802 0.0497453967 -0.0014604096 -0.0022829448 -0.0035052823 0.0004022661 -0.0027650746 -0.0047515408 0.0028546310 0.0031398702 0.0044704183 0.0009401182 0.0027069024 0.0038851843 0.0007822987 0.0064514193 0.0025873048 -0.0043253883 -0.0037781355 -0.0027126793 -0.0010199471 -0.0009989557 -0.0073166724 -0.0012295961 0.0151973480 0.0029290803 0.0004019084 -0.0010680921 -0.0033073427 0.0094392516 0.0118744884 0.0003627347 0.0001886714 -0.0066202460 -0.0060752077 -0.0034088225 -0.0061009475 -0.0019131847 -0.0033302262 -0.0018200369 -0.0072332354 0.0029244302 -0.0094264332 -0.0025390893 -0.0003711093 0.0009389971 -0.0064189890 0.0003112769 -0.0031555821 0.0011628935 -0.0147678559 0.0028266354 -0.0043742776 -0.0128837503 0.0117755483 -0.0148400032 -0.0005519770 -0.0002776702 0.0069062813 -0.0047839908 0.0204163203 -0.0125512617 -0.0041973045 0.0105230686 0.0001110091 0.0037633535 -0.0022952942 -0.0018372073 -0.0040344952 0.0003717514 -0.0008478458 0.0075125225 0.0061863622 0.0047992021 -0.0064293542 -0.0010426367 0.0016217397 -0.0046826500 0.0092167737 0.0165047863 0.0088626055 -0.0082615221 -0.0180654793 -0.0128660914 0.0092523735 0.0204911474 -0.0255073546 -0.0132310559 -0.0196824688 -0.0070223743 0.0096625608 0.0223840673 -0.0343392233 -0.0220889953 -0.0571114467 0.0024415704 -0.0201911394 -0.0144836256 0.0043414480 0.0028293857 0.0260866989 -0.0045720393 -0.0174984762 -0.0078263044 0.0224490801 0.0335360763 0.0608597148 -0.0124753232 0.0070794472 0.0128706159 0.0096716415 -0.0088660842 -0.0051677783 -0.0141191074 0.0104298521 0.0060615308 0.0165677747 -0.0080840425 -0.0149563926 -0.0099932564 0.0055086995 -0.0026911607 0.0520949905 -0.0281884327 -0.0327878134 0.0118773514 -0.0126475432 -0.0092195859 -0.0227909484 0.0095523516 0.0067366928 0.0178739369 -0.0140161467 -0.0094939439 -0.0472003836 0.0257901296 0.0233527391 -0.1076956717 -0.1297150056 -0.0108154387 0.0408057293 -0.0627168785 -0.0734426444 -0.1710294252 -0.2397830269 -0.0570238184 -0.1006344309 -0.1946676372 -0.0605050413 -0.1047856568 0.0695779974 0.0693613771 -0.0667098708 0.1265209060 0.0649233504 -0.1964680091 0.1774755916 0.1035946052 0.0477584059 0.0829797495 0.0207136894 0.0169067507 0.0269888489 0.0445382181 -0.0195851578 -0.0287771783 -0.1748196869 -0.0104355753 0.0190569343 -0.0505614278 0.0563588723 -0.0049200763 0.0025489184 0.0528082715 0.0151861936 0.0526967284 0.0625931571 -0.0175754437 -0.0126518305 0.0617482595 -0.0182303610 -0.0043450122 -0.0362999152 0.0140060849 0.0359728522 0.0088861198 -0.0046126149 0.0078875320 -0.0972094029 0.0598853645 0.0871882741 0.0026718994 0.0479781921 0.0434282377 0.0430372259 -0.0143757330 -0.0520567796 -0.0659556304 -0.0149030249 -0.0169863464 -0.0186044159 -0.0314563015 0.0515660936 0.0515662888 0.0292919504 -0.0252340107 0.0121251436 -0.0558489090 0.2355820586 -0.1891601387 -0.0073744551 -0.1752791508 -0.0193191145 0.0358994834 -0.0893801166 -0.0269037399 0.0455657817 -0.0484014941 0.1190399713 -0.0389718679 -0.0198824953 0.0704933584 0.0933709320 0.1128385662 -0.0439058767 0.0971429882 -0.0091710407 0.0460170951 -0.0932093792 0.0125456295 0.1078031357 -0.0093865747 -0.0285159102 0.1010981561 0.0755800426 0.2042487077 -0.0464605383 0.0884883357 -0.0219608762 -0.0274368205 -0.0450368240 0.0485989894 -0.0846576558 -0.0666339396 -0.0125580441 -0.1635505071 0.0022200786 -0.0829460795 0.0307020259 -0.0056986528 -0.0111015857 -0.0240675819 0.0109995188 0.0073332479 0.0385764136 0.0279059568 -0.0152159183 0.0229396597 0.0089309785 -0.0026405094 -0.0181146120 -0.0060564721 0.0111281451 0.0046007551 0.0018448060 0.0045964093 0.0348833204 0.0286525214 -0.0335666895 0.0065012447 0.0616317933 -0.0348766390 -0.0329462771 0.0011673239 -0.0022970474 0.0000824016 -0.0443609196 -0.0085171951 -0.0306941452 0.0150084691 -0.0138118870 -0.0809771766 -0.0603266185 -0.0059466274 -0.1128641849 0.0530847502 -0.0915363213 0.0111535647 -0.0182686649 0.0054054640 0.0546804606 -0.0122036457 -0.0335304068 -0.0729709168 -0.0274902708 0.0210631288 -0.0438591404 -0.0467728914 -0.0327221724 0.0288766885 0.0131950138 -0.0012435716 0.0332344503 -0.0327943317 0.0048661026 0.0071097383 0.0211700710 -0.0351739564 0.0042324816 0.0287531732 0.0280228301 -0.1040838040 -0.0043736072 0.0444146638 -0.0129046276 0.0472603491 0.0333524615 0.0072829453 -0.0436186314 0.0083998445 0.0534225632 -0.0844933628 0.0105767833 -0.0007261580 -0.0194625482 -0.0002856298 -0.0040139167 0.0115119835 -0.0492064520 0.0044801386 0.0255904408 -0.0552953171 0.0052935241 0.0017918388 -0.0186630302 0.0017234998 0.0267571075 0.0286115160 0.0009562026 0.0357058848 0.0383791357 0.0020437224 0.0245721085 0.0258008463 0.0258315308 0.0094121337 -0.0045776339 0.0069864536 0.1323737601 0.0738657034 0.0252892763 0.0163362766 -0.0020166498 0.0054852473 0.0076625163 -0.0230936966 0.0006391717 -0.0016360819 -0.0157014988 -0.0023115760 -0.0035194879 0.0224178224 0.0028282350 0.0217903797 -0.0019072040 -0.0099999789 -0.0002622112 0.0203354735 -0.0113393619 0.0009576621 -0.0182068218 -0.0182707422 -0.0163913805 -0.0054335038 -0.0256931177 -0.0186497549 0.0543729265 0.0021757391 0.0035381846 -0.0094367922 -0.0050418018 -0.0282828998 0.0497408548 -0.0102878150 -0.0210590061 -0.0103447022 -0.0037559073 -0.0110475109 -0.0068589472 -0.0122096258 0.0084321144 -0.0112131149 0.0021602706 -0.0188695735 0.0006725253 -0.0078708247 0.0021406624 -0.0063154092 -0.0017879383 -0.0078977240 -0.0005564801 -0.0221514233 0.0068978664 -0.0119398459 -0.0276650581 0.0392195052 -0.0216473106 0.0017851241 -0.0036302941 0.0091934262 -0.0239620598 0.0371132595 -0.0165045603 -0.0167939746 0.0175764466 -0.0101194841 0.0109549264 -0.0063115139 -0.0012431583 -0.0043735292 -0.0035028293 -0.0014476843 0.0101462963 0.0084876429 0.0037932162 -0.0033168089 0.0036195100 0.0032283452 -0.0126651856 0.0331256785 0.0309174628 0.0283789801 -0.0083023801 -0.0450253226 -0.0284100048 0.0296302021 0.0434660953 -0.0653785028 -0.0358194785 -0.0397719321 -0.0000585151 0.0303857666 0.0486049005 -0.0820372505 -0.0601061681 -0.1200845917 0.0031890087 -0.0466699434 -0.0326078411 0.0077123899 -0.0012775909 0.0608934554 -0.0277185818 -0.0388879350 -0.0148263676 0.0502329523 0.0706298765 0.1375999596 -0.0489083745 0.0351631440 0.0558928359 0.0390540896 -0.0326133276 -0.0241482236 -0.0567427635 0.0545964709 0.0293962429 0.0758419052 -0.0340657862 -0.0627535483 -0.0338957387 0.0345562823 -0.0039034483 0.2354801141 -0.1291866870 -0.1351814912 0.0505198122 -0.0549619694 -0.0475230352 -0.1045559263 0.0409128866 0.0260384629 0.0800517035 -0.0641652884 -0.0542673679 -0.2127334109 0.1055262924 0.0977860858 0.0324542832 0.0523867548 0.0036937850 -0.0759991759 0.0266078505 0.0309606802 0.0877465805 0.1553735569 0.0259820605 -0.0065044195 0.0748927449 0.0275887650 0.0938555457 -0.0476225374 -0.0354815176 0.0712521707 -0.0685276959 -0.0285973734 0.1244598803 -0.0749949836 -0.0358787590 0.0507330538 -0.0460953187 -0.0309565479 0.0105771201 0.0072027524 0.0530770945 -0.0420622103 -0.0381923431 -0.1394690632 -0.0145322665 0.0013705692 -0.0337374001 0.0481972121 -0.0229957928 -0.0044011754 0.0416293814 -0.0082627788 0.0475202215 0.0610205274 -0.0305627795 -0.0031162254 0.0679246783 -0.0334048485 -0.0036330994 -0.0419296304 0.0042499369 0.0442042627 0.0048225977 -0.0160454865 0.0151325361 -0.0972748982 0.0549387005 0.1053999071 -0.0028725520 0.0437802133 0.0533744560 0.0312421403 -0.0242993628 -0.0460285277 -0.0568749282 0.0036965377 -0.0208884132 0.0012996868 -0.0225364978 0.0430834423 0.0200603168 0.0309339912 -0.0354375958 -0.1037447177 0.0970597445 -0.1451376199 0.2547104236 -0.1498495548 0.3029639985 0.0620216205 -0.1235723637 0.1020745697 0.0621209271 -0.0006413939 0.0733508737 -0.1132818763 -0.0133408268 -0.0414328292 -0.0911601238 -0.0454104793 -0.1715149687 0.1194682896 -0.0459829698 0.0286722935 -0.0524692268 0.0794379604 -0.0796579247 -0.0721975718 -0.0669226404 0.0103693120 -0.2029672363 0.0071269011 -0.2307974685 0.1581394861 -0.0544417488 0.0958804625 -0.0226728135 0.0562453937 -0.0101740972 0.0043186468 0.0760530101 0.0252999732 0.0474691906 0.0346185556 0.0982749186 -0.0293520815 0.0398857263 0.0249278579 0.0358814751 -0.0508909857 -0.0126053531 -0.0369978713 -0.0292753663 0.0178147167 0.0128474280 0.0091429453 -0.0090135148 0.0325762052 0.0073505503 -0.0206921787 -0.0211311859 -0.0231189873 -0.0048021990 -0.0056641514 -0.0482092059 0.0067651645 0.0218367892 -0.0458697221 0.0070194512 0.0113144191 0.0218390135 -0.0024376881 -0.0217593547 0.0376712404 -0.0050355209 0.0418025952 -0.0543671863 0.0055968426 0.0392842402 0.0550086081 0.0662035970 0.0385768633 0.0170869118 -0.0304644743 0.0073142923 -0.0084311426 -0.0059813700 -0.0151287441 0.0185470263 0.0205543281 0.0188474386 0.0124543401 -0.0052438766 0.0228006848 0.0014217694 0.0010371332 -0.0111563578 -0.0051708174 0.0013190647 -0.0111724801 0.0124111084 -0.0064286228 -0.0010814621 -0.0057372169 0.0121073907 -0.0025458468 -0.0111367215 -0.0102640285 0.0218931814 -0.0065571329 -0.0138934955 0.0063950214 -0.0231626503 -0.0168316385 0.0004837178 0.0165315732 -0.0060280433 -0.0183116593 0.0253585603 -0.0019507697 -0.0054857961 0.0054051435 -0.0091673562 -0.0134894578 -0.0144355985 0.0042190260 -0.0044580818 0.0112003407 0.0209502509 0.0067058809 -0.0105483811 0.0137401472 0.0026808188 -0.0062034485 -0.0099043372 0.0021689635 -0.0193376910 -0.0224575082 0.0027800773 -0.0037564046 -0.0059470565 0.0010070981 -0.0157470142 -0.0092160457 0.0037628213 -0.0335294300 -0.0223938156 -0.0000863837 -0.0169266933 -0.0106308297 0.0144040828 0.0228657466 -0.0328035122 -0.0001621562 0.0072347934 -0.0154769208 -0.0114423177 -0.0123585590 0.0234391339 0.0025133276 0.0358175154 -0.0192676142 -0.0203243848 -0.0134594757 0.0223611100 -0.0117178939 0.0110503599 -0.0242638240 -0.0275417986 -0.0233890593 0.0098052358 -0.0379963890 -0.0679168076 0.0785766799 0.0071100258 0.0126047998 -0.0088403522 -0.0351375604 -0.0770106524 0.0795142722 -0.0273638868 -0.0242790552 0.0055082843 0.0018970706 -0.0049266343 -0.0106280217 -0.0062807472 0.0013603954 0.0064876199 -0.0035336973 -0.0040734931 0.0076562823 -0.0091106616 0.0074690085 0.0060719497 0.0044965064 -0.0056151710 -0.0078578461 0.0035618013 0.0084462519 -0.0156661555 -0.0036068503 0.0151700603 0.0133292665 0.0042816069 -0.0022290029 -0.0028240400 -0.0196420505 0.0072452018 0.0073756193 -0.0023204232 -0.0090236443 -0.0169234978 0.0073596907 -0.0053424940 0.0036642050 0.0061161214 -0.0068546985 0.0005042730 -0.0006322769 -0.0031711216 -0.0037667012 0.0089219816 0.0033479712 0.0013248027 -0.0046147848 0.0317046103 0.0193943754 0.0197928580 0.0033439355 -0.0303050060 -0.0126132455 0.0280602006 0.0233166848 -0.0428100212 -0.0250829189 -0.0239867000 0.0127889301 0.0262661747 0.0213352831 -0.0485198756 -0.0517419754 -0.0751543317 -0.0062822372 -0.0273265221 -0.0223701700 -0.0028531626 -0.0026439329 0.0414640471 -0.0365072319 -0.0228938355 -0.0137712530 0.0217487163 0.0395910019 0.0901725550 -0.0487326085 0.0417599311 0.0627287866 0.0361947189 -0.0335884056 -0.0314532208 -0.0541212772 0.0657926869 0.0373486598 0.0888366034 -0.0313196093 -0.0614533057 -0.0287895306 0.0442702113 0.0018026204 0.2630711785 -0.1398624464 -0.1326975714 0.0509958430 -0.0547363130 -0.0620170441 -0.1165449314 0.0454072647 0.0221346941 0.0855947643 -0.0652295859 -0.0695840744 -0.2386505278 0.1031667382 0.0996415564 0.0076745371 -0.0017642827 -0.0029491038 0.0612728121 0.0027815862 -0.0099102663 -0.0198920280 -0.0531601322 -0.0163400624 0.0255516904 -0.0050927206 -0.0087951719 -0.0465226071 0.0180557684 0.0114778084 -0.0451720246 0.0070272454 0.0069162168 -0.0406657046 0.0143884372 0.0144600966 -0.0531556865 0.0206410960 0.0115297085 0.0073388131 0.0192388673 -0.1014832915 0.0845893044 0.0573350196 0.0461627479 0.0244170428 0.0328896349 -0.0249729158 -0.0171632158 0.0792322990 0.0924414651 0.0008253160 0.0522737925 -0.0105937552 0.0007778594 0.0239607211 -0.0150723946 -0.0773677701 0.0713318536 0.0649097848 0.0014661656 0.0080875461 -0.0207875001 0.0658079620 -0.0344262996 -0.0633570657 -0.0745128052 0.0482851338 0.0149683757 -0.0056939693 -0.0141179992 -0.0201712975 0.0326581095 -0.0118235385 0.0208039151 -0.0105734723 -0.0226040332 -0.0042651787 -0.0159896633 -0.0046581885 0.0074471357 0.0194474451 -0.0018080994 0.0011169293 -0.1516963573 0.0609251019 0.0587956703 0.0888094022 -0.2238663670 0.2232177481 0.0725060756 -0.0994160681 0.0383265250 0.0561095120 0.0466850782 0.0462395359 0.0280337940 -0.0582998659 -0.1090533669 -0.0365710550 0.1072451802 -0.0839696139 0.0868411495 0.0751002376 0.0549929855 -0.0128083053 -0.0311556622 -0.1072718431 0.0674360399 -0.0774028143 -0.0451732829 -0.1468566791 0.1564978730 -0.0753433035 0.1325536910 0.0488062732 0.1208689984 -0.0726158417 0.0081071024 0.0367493655 -0.0958332426 -0.0061860773 0.0218237645 -0.1386318789 0.0250443247 0.0415005633 0.0074265727 0.0354194321 0.0108561739 0.0072969821 -0.0402489967 -0.0023532862 0.0101534430 0.0069917675 0.0002746129 0.0441945917 0.0199360805 -0.0157034691 0.0102803325 -0.0027853144 -0.0090880994 -0.0197702490 -0.0204566185 -0.0000827610 0.0433497743 -0.0142195378 -0.0272946771 0.0396703117 0.0261855843 -0.0253626479 -0.0314135719 0.0230724179 0.0013386015 -0.0247882222 -0.0158030197 -0.0135439892 0.0117171093 -0.0380008003 -0.0029635696 -0.0666455660 -0.0322169754 0.0691411006 -0.0851874279 0.0372940175 0.0167658690 -0.0064039151 -0.0116956352 0.0354479611 0.0168647707 0.0003375536 -0.0068866793 -0.0178376559 -0.0059475065 0.0052420481 -0.0084894540 -0.0152503454 -0.0100803090 0.0076142332 0.0038000707 -0.0016765687 0.0059753271 -0.0050225874 0.0007813380 0.0011907584 0.0033298256 -0.0046372441 0.0005971336 0.0056642249 0.0051596552 -0.0280649220 -0.0022142469 0.0113436271 -0.0033799068 0.0107099850 0.0073597186 -0.0013851874 -0.0062071301 0.0003138415 0.0114889929 -0.0184500821 0.0010012329 -0.0031188229 -0.0018814937 -0.0009848938 -0.0069500953 -0.0028387781 -0.0049284983 -0.0005936515 0.0117755814 -0.0002409099 0.0086598923 -0.0018640701 -0.0028988017 0.0018666644 0.0074601869 0.0074895904 0.0011337387 0.0049785380 0.0055867838 0.0017066113 0.0040872219 0.0047150307 0.0075494984 0.0009298799 -0.0023858133 0.0021159467 0.0347717761 0.0186851828 0.0068824075 0.0031466324 -0.0021256170 -0.0233046715 -0.0386289582 0.0588034800 -0.0012532982 -0.0138294688 0.0346340526 0.0189095715 0.0209882946 -0.0418403688 -0.0082123748 -0.0603899430 0.0299688942 0.0251578638 0.0250742228 -0.0401594677 0.0106317539 -0.0159676727 0.0424878016 0.0568373697 0.0508878910 -0.0171992577 0.0715933527 0.1211752174 -0.1460314010 -0.0067662356 -0.0181973198 0.0169428403 0.0483613814 0.1394942139 -0.1445495013 0.0379054980 0.0597713339 -0.0152685270 -0.0315135737 0.0040244837 0.0211617540 0.0017237338 -0.0207194849 -0.0411026801 0.0143481437 -0.0244584477 -0.0294316550 0.0150471851 -0.0123588005 -0.0337693903 -0.0269381167 0.0133745842 0.0298118247 -0.0899461818 0.0023239625 0.0261799319 -0.0342899361 -0.0284697158 -0.0864357997 -0.0115086787 0.0100736163 0.0274487977 0.0613672903 0.0177008742 -0.0478430287 -0.0180363801 0.0579212640 0.0535358590 -0.0123091388 0.0096368902 -0.0032527210 -0.0024932129 0.0102532762 -0.0001465409 0.0347115328 0.0244572068 0.0263246798 -0.0320162096 -0.0066146412 0.0082512255 -0.0037270049 -0.0141627780 0.0192842532 -0.0140714410 -0.0510627487 -0.0658353925 -0.0057338115 0.0091907574 0.0757365322 -0.0173595752 -0.0263150179 -0.0881945184 -0.0146176294 0.0362351467 0.1424251870 -0.0425739000 -0.0372194206 -0.1767579689 0.0066738102 -0.0322688872 -0.0512993010 0.0264331818 0.0344852011 0.0686770674 0.0427149930 -0.0103783659 0.0111632660 0.0651335527 0.1083513988 0.2321228179 0.0683509555 -0.0445735944 -0.0372610608 -0.0107151889 0.0002474155 0.0072081339 0.0454311387 -0.0304918995 -0.0314346814 -0.0688688933 0.0370715434 0.0388926538 -0.0257257641 -0.0047147675 -0.0048115462 -0.2255571081 0.1153501921 0.1341833077 -0.0593656185 0.0303094809 0.0414303722 0.0776335788 -0.0369061670 -0.0540118482 -0.1127240942 0.0636532497 0.0847175131 0.1534734164 -0.0717165452 -0.1019568593 0.0140729732 0.0201413440 -0.0019804286 -0.0085159819 0.0115999030 0.0060473199 0.0268292854 0.0454495337 -0.0021191256 -0.0027738360 0.0266333875 0.0057715044 0.0234677008 -0.0131333173 -0.0117360833 0.0058383611 -0.0365936430 -0.0082352994 0.0444689903 -0.0227330484 -0.0006472923 0.0082056450 -0.0066228789 -0.0167677434 0.0106772873 0.0012106559 -0.0802725966 0.0460806039 0.0284281123 -0.0051340140 0.0150147453 0.0172179731 -0.0380650157 0.0136603577 0.0674433579 0.1182155229 0.0235350571 0.0300516386 0.0221551819 0.0613801843 -0.0034708191 -0.0163219737 -0.0212465027 0.0469457559 0.0816510407 -0.0432221348 0.0001870920 0.0081262845 0.0841661512 -0.0587163140 -0.0686291331 -0.1871823782 0.0941927599 0.1048572405 -0.0294454751 0.0048460348 0.0359114346 0.0484394568 -0.0465378272 -0.0122742659 -0.0491153647 -0.0046868707 -0.0263923579 0.0080672709 -0.0223893583 0.0412425400 0.0058018204 0.0259259132 -0.0367086996 0.1506620441 -0.0378443849 -0.0579058776 -0.0497717988 0.2100805314 -0.2408897177 -0.0792704083 0.0540298316 -0.0511943818 -0.0550512703 -0.0288504789 -0.0479137603 -0.0712643437 0.0388633782 0.1318876773 0.0342479576 -0.1661446542 0.0631201101 -0.0475690009 -0.0884508263 -0.0855391761 0.0112105170 0.0614049452 0.1148486182 -0.1031448406 0.0382458731 0.0721130735 0.1220328786 -0.2075593496 0.0856011173 -0.0890447394 -0.0580525026 -0.1400188015 0.0730674494 0.0157460203 -0.0222751400 0.0955500742 0.0449921834 -0.0054857050 0.1499183369 0.0036538994 -0.0145139911 -0.0271987819 -0.0107854485 -0.0079538831 0.0076909955 0.0126581371 -0.0139320297 -0.0315794087 -0.0208433569 0.0043931978 -0.0348384698 -0.0140767850 0.0093923056 0.0105831643 0.0050240147 0.0053192966 0.0103054382 0.0064801977 0.0063463346 -0.0440201801 -0.0116130106 0.0309009191 -0.0266423336 -0.0495693590 0.0251244586 0.0406074534 -0.0114194440 0.0149767090 0.0212491218 0.0320423872 0.0347056059 0.0033442799 0.0104965477 -0.0136952231 0.0805212352 0.0708718866 -0.0542860968 0.0909347670 0.0110860007 -0.0818129834 -0.0140681932 0.0062047032 0.0312885211 -0.0110536885 0.0102644295 0.0143748986 0.0089261146 0.0073359131 -0.0010140115 0.0126080116 0.0010101299 -0.0012524053 -0.0045148577 -0.0021082772 0.0008114404 -0.0056504463 0.0064272762 -0.0046297142 -0.0027259091 -0.0026008867 0.0060810960 -0.0007457471 -0.0060257832 -0.0058281133 0.0101365179 -0.0053995736 -0.0080947860 0.0046853322 -0.0148981986 -0.0105625832 0.0007198359 0.0071143305 -0.0028755165 -0.0090120469 0.0105728754 -0.0002287280 -0.0071652613 0.0049308880 -0.0064930014 -0.0028514401 -0.0032708346 0.0016014819 -0.0017404241 -0.0041168506 0.0082678553 -0.0013617903 -0.0018792357 0.0059601408 0.0001235374 -0.0055091169 -0.0065785506 0.0001751260 -0.0078907146 -0.0084828692 -0.0003221441 -0.0048339248 -0.0052854806 0.0031229635 -0.0123426769 -0.0078425539 0.0041451552 -0.0172935202 -0.0119976691 0.0026904567 -0.0133659401 -0.0085238695 -0.0042991373 -0.0101128312 0.0376574627 -0.0046463252 0.0015465509 0.0370155280 -0.0003943856 0.0041769097 -0.0326251130 -0.0102956732 -0.0307729752 -0.0004899944 0.0024709372 0.0015956725 -0.0322570809 0.0061400628 0.0020467929 0.0293039328 0.0405692607 0.0429655497 0.0078982203 0.0415011519 0.0403077737 -0.0943075221 0.0006564298 -0.0012920855 0.0149207419 -0.0079362377 0.0512507887 -0.0852163592 0.0051578571 0.0570386533 0.0079758840 -0.0228556085 0.0032030152 0.0290181110 0.0083096651 -0.0182221534 -0.0341622296 0.0084806518 -0.0086086555 -0.0304994932 0.0155279038 -0.0168487921 -0.0296679326 -0.0268637025 0.0091463140 0.0335535529 -0.0665440784 -0.0247986346 0.0423628761 -0.0150030204 -0.0451281349 -0.0692708012 -0.0082780211 0.0078184180 0.0209361627 0.0644671878 -0.0059373841 -0.0379899936 -0.0039650912 0.0270225022 0.0645659962 -0.0127050247 0.0095347115 0.0059998055 0.0163893311 0.0006783835 0.0020775235 0.0219462593 0.0204046343 0.0184038607 -0.0262524148 -0.0051677817 0.0042748541 0.0029845227 0.0054524112 0.0251360998 -0.0101677260 -0.0512935741 -0.0995180147 0.0012397406 0.0395061386 0.0970675859 -0.0360555839 -0.0443822266 -0.1210099442 0.0088569140 0.0734326986 0.1821310454 -0.0590120895 -0.0882240655 -0.2452793999 -0.0096370038 -0.0465876135 -0.0745873323 0.0162705210 0.0421513953 0.1057752897 0.0137426869 -0.0156349586 0.0100742451 0.0698592436 0.1454909656 0.3370794679 0.0456292843 -0.0175480499 0.0218665017 0.0033958218 -0.0336062378 -0.0211778708 0.0187632587 0.0283913540 0.0011726814 0.0031959058 0.0315608206 0.0017705849 -0.0430288823 0.0340271681 -0.0107056575 -0.0285240465 0.0211221300 0.0635945308 -0.0331267454 -0.0089886944 -0.0160983377 -0.0136803936 -0.0000899139 -0.0604572161 -0.0493994439 0.0200619966 0.0321814178 -0.0271883116 -0.0098665706 -0.0556059082 0.0023490641 -0.0046422925 0.0019584145 0.0332532194 0.0017615577 -0.0047128720 -0.0141028104 -0.0371123268 -0.0010446989 0.0212918099 -0.0080973658 -0.0038872249 -0.0292969956 0.0127834925 0.0131914707 -0.0086180411 0.0331842037 0.0065659385 -0.0453081442 0.0094738494 -0.0077528105 -0.0349958067 0.0020972992 0.0283151413 0.0014558174 -0.0074240132 -0.0038031504 -0.0100729247 -0.0065840203 -0.0179283344 -0.0024422429 -0.0042664885 -0.0107716921 0.0104799598 0.0093674533 0.0359592375 0.0109439915 -0.0030455882 0.0158550817 0.0151479194 -0.0036077720 -0.0026677225 0.0036951162 0.0018147672 0.0233679507 -0.0172655245 0.0004849076 0.0045304856 0.0175052388 -0.0171472532 -0.0159724725 -0.0557282254 0.0271524280 0.0328200349 -0.0111159534 0.0087339676 0.0119438216 0.0135476089 -0.0237879510 -0.0224830010 -0.0187643479 0.0022958963 -0.0072744428 0.0054529483 -0.0055374161 0.0176196751 0.0031539674 0.0219489751 -0.0124733288 0.0456185714 -0.0679891677 -0.1592940074 0.0874663985 0.0928440829 0.3338025015 0.0605136683 0.1833673004 0.1811694476 0.0005542554 -0.1344638714 0.0635382150 0.0441398303 0.1555282349 -0.0701581392 -0.0787089827 0.1649605551 -0.0593833733 -0.1364526204 -0.0698213258 0.1627371251 -0.0667710389 -0.0305765578 -0.0462881042 0.0278879119 0.2098871404 -0.0713263202 0.0194190066 0.1363058039 -0.3099363528 -0.1199670642 -0.1119309027 0.1680910545 0.0332463177 -0.0580380768 -0.1170412387 0.0690021617 -0.1013238347 -0.0944777974 0.0821705201 -0.1097406335 -0.1200573277 0.0653242449 -0.1108677310 0.0079223478 -0.0418457407 0.1147845980 0.0728037590 0.0626349443 0.0323097519 -0.0023648793 -0.0627464644 -0.0387666421 0.0394656744 -0.0787738891 -0.0058801324 0.0037210884 0.0409538606 0.0611365585 -0.0383946018 -0.0417231451 0.0920626116 -0.0022396814 -0.0823595810 0.0510858507 0.0019680686 -0.0269799862 -0.0500956115 -0.1020982281 0.0080451748 -0.0290883677 -0.1186946062 -0.0421849936 0.1118447484 0.0816027635 0.0784871675 -0.1320708316 -0.0437552062 0.0925126393 -0.2206740070 -0.0528203295 0.0010576024 -0.0072582344 0.0091591767 -0.0173059213 -0.0367219618 -0.0317550020 0.0151808033 -0.0070550605 -0.0140391872 -0.0216213969 0.0387682830 0.0320218764 0.0000692439 0.0001591272 0.0003654347 0.0011094019 -0.0050411297 -0.0012237372 0.0025156203 -0.0007237079 -0.0019701262 0.0021362622 0.0026961670 0.0024628948 0.0412736221 0.0225721440 -0.0022329156 -0.0058086993 0.0211164055 0.0151813439 0.0127781535 -0.0044156097 0.0015145348 -0.0051732216 0.0126942169 -0.0035720394 0.0150284808 -0.0083386985 0.0027410975 -0.0020966128 -0.0032269835 0.0039883748 0.0015301726 0.0056532826 0.0034357026 0.0018431625 0.0101850217 -0.0106635766 -0.0072982765 -0.0079545782 -0.0049433787 -0.0056635043 0.0158692895 0.0164528890 -0.0076153391 -0.0022712845 -0.0017927276 -0.0291972655 0.0373020952 0.0306492039 -0.0187320555 -0.0341358440 -0.0106395217 -0.0262216959 0.0369540998 0.0332931099 0.0041167032 0.0052256341 0.0004423536 -0.0006957385 0.0064981294 0.0048904322 -0.0045612605 -0.0024155065 -0.0021664487 -0.0026822351 0.0028657835 -0.0074999729 -0.0060071467 -0.0056151784 -0.0024099272 -0.0004594518 0.0058403721 0.0004155603 -0.0031640515 0.0018810104 0.0100122000 -0.0011296574 -0.0197413293 0.0029024872 0.0015201557 0.0029475755 0.0025353768 -0.0166157824 -0.0160950240 0.0039619014 -0.0085126571 0.0084868920 0.0073935378 -0.0049903408 0.0025973180 0.0064636227 0.0022574412 -0.0023279746 -0.0076081717 0.0059940171 -0.0079003942 -0.0043780067 0.0045214776 0.0000951305 -0.0066703453 -0.0041384337 0.0046448123 0.0067950399 -0.0204664579 0.0098849556 0.0049684376 -0.0085135633 0.0025935850 -0.0191107845 -0.0038772259 0.0017153715 0.0049548384 0.0136685567 0.0090035677 -0.0106155560 -0.0032873429 0.0195653505 0.0122324761 -0.0004203807 0.0012626479 0.0028939392 0.0069173669 -0.0020254280 0.0001387056 0.0073876420 0.0021662891 0.0062312527 -0.0071876684 -0.0025402879 0.0016696398 0.0029887473 0.0069789732 0.0037653508 -0.0033531108 -0.0095677306 -0.0310131780 0.0062793952 0.0173260120 0.0269564976 -0.0083004279 -0.0148607502 -0.0364743816 0.0140276021 0.0284582729 0.0550676072 -0.0112502419 -0.0340251361 -0.0699482990 -0.0085050680 -0.0102174881 -0.0235682466 0.0005806040 0.0117003601 0.0326073967 -0.0062785856 -0.0002630725 0.0028124134 0.0138325476 0.0389105953 0.1053819936 0.0094390834 -0.0002331137 0.0159443667 0.0030396388 -0.0129387334 -0.0097917844 0.0017317971 0.0186688395 0.0067419268 0.0136794136 0.0081011167 -0.0042879529 -0.0136261605 0.0174128268 -0.0018639305 0.0252653625 -0.0097434493 0.0082222101 -0.0046815696 -0.0086125011 -0.0134848138 -0.0182362711 0.0056851257 -0.0170147333 -0.0035844805 -0.0015009185 0.0000530153 -0.0367445269 0.0062194658 -0.0071419999 -0.0527395818 -0.0506888195 0.0026923182 -0.0983093631 -0.0551948434 0.0083803894 -0.0362479884 -0.0219096677 0.0252630358 -0.0471717007 -0.0522609013 0.0002802381 0.0245411880 0.0002133532 -0.0142809394 0.0237375099 0.0050331027 -0.0120279965 0.0002528097 0.0486848411 0.0206158775 0.0932642858 0.0137650094 -0.0459523123 0.1321974929 -0.0197766853 0.0256624367 0.2539847096 -0.1157707977 -0.0019985366 0.2046704513 -0.1061058579 0.0154528698 -0.0172365427 -0.0832909386 0.0322365115 0.0492703876 -0.0283822035 0.0183601313 -0.0496408310 -0.0260933940 -0.0117339154 -0.0045910906 -0.0765982749 0.0337296864 -0.0767689701 -0.0538532955 -0.0665273490 -0.0909697617 -0.0043626800 -0.0276698591 -0.0592430565 -0.0799423128 -0.1030365020 -0.0001248944 -0.0018509170 -0.0394927764 0.0439346406 -0.0097697136 -0.0233635745 -0.0073099170 0.0043265549 0.0169194461 -0.0198911325 -0.0121959918 -0.0028090542 0.0271977111 -0.0119532342 0.0119419273 -0.0144165253 0.0034667594 0.0067763387 -0.0115057422 -0.0173331716 -0.0028905115 0.0012780288 -0.0065723967 -0.0064469465 0.0024428124 0.0053363642 -0.0016900294 0.0108176059 -0.0090136071 -0.0084667284 0.0029074190 0.0092256986 0.0043563647 0.0026378851 0.0106221401 0.0003777197 0.0036679998 -0.0079132557 -0.0063785861 0.0141099040 -0.0098627001 -0.0029411685 -0.0020735387 0.0109512779 0.0150837664 0.0038597670 0.0102950215 0.0020218632 -0.0052617729 -0.0024961197 0.0072449346 -0.0092792984 -0.0005403913 0.0031479898 -0.0120794321 0.0009800203 0.0102150348 0.0003201276 0.0037989472 0.0011733768 0.0000899181 -0.0042910016 -0.0004142727 0.0001951136 0.0008249286 0.0000674501 0.0045416079 0.0020063884 -0.0016232344 0.0008281182 -0.0005155071 -0.0009648607 -0.0029733023 -0.0021361502 0.0007950450 0.0039169028 -0.0015087733 -0.0025672298 0.0046791419 0.0020132028 -0.0015124727 -0.0016616936 0.0015620760 0.0016008485 -0.0029897660 -0.0015296738 0.0006137228 0.0009690339 -0.0040279489 0.0000494946 -0.0170831468 -0.0003894912 0.0049107377 -0.0191242284 0.0168360591 0.0033300375 0.0003223505 -0.0312592726 0.0017692336 0.0030517198 0.0057945725 0.0046989946 -0.0021961774 0.0008079203 0.0032848248 0.0029191018 -0.0052151038 -0.0049760087 0.0003765930 0.0010512656 -0.0002978174 0.0000600442 0.0015579253 -0.0003706883 0.0001396401 -0.0015124058 0.0012574832 -0.0003223353 -0.0013911189 -0.0015936688 -0.0070052301 -0.0032376325 0.0002984393 0.0007439937 -0.0028132604 -0.0021596213 -0.0035875841 0.0027907326 -0.0018748796 0.0011460489 -0.0026075530 0.0015528611 -0.0030151254 0.0004723759 -0.0025988198 -0.0014131163 -0.0021428299 0.0077924225 -0.0013371019 0.0045020211 0.0015839941 -0.0026162151 0.0024290685 -0.0011148968 0.0009717820 0.0001525864 0.0001115449 0.0006901663 -0.0033140297 -0.0029446864 0.0005798310 -0.0027845947 -0.0020640875 0.0044020473 -0.0054547392 -0.0046965599 0.0030135550 0.0059797114 0.0024287698 0.0044929190 -0.0054815643 -0.0055158716 0.0011664983 -0.0498241462 0.0097302929 -0.0850151063 0.0395123007 0.0193703946 -0.0756937838 0.0761142186 0.0237483615 -0.0845894728 -0.0009868408 0.0527128021 -0.0847968414 0.0529560757 -0.0092167632 -0.1095637440 -0.0095207386 -0.0395324606 -0.1398797756 0.1177057441 -0.0863276098 -0.0611409642 0.1624045337 -0.0295694636 0.0179992328 -0.0283516361 -0.0045800273 -0.0118065566 0.1306575774 -0.0621941879 -0.1106297497 0.0932578505 -0.0794435518 0.0359416067 0.0128397289 0.0386259303 0.0304952519 0.0397344860 0.0267489234 0.0553031519 0.0004571845 0.0235183356 0.0588012199 0.0490789495 0.0073958157 0.0752529014 0.0237672406 -0.0036108764 0.0491688582 0.0889812548 0.0097472985 -0.0047976570 0.0956980679 0.0017612857 -0.0126655923 -0.0121358809 0.0047390008 0.0255829662 0.1023953548 -0.0087933255 0.0747571418 0.1014217206 0.0200068077 0.1002052249 -0.0125284438 0.0056912905 0.0542974898 -0.0328425901 -0.0393452713 -0.0486140612 -0.0118197055 0.0046645478 -0.0422817264 -0.0285250812 -0.0321482497 0.1827777062 -0.0668226661 -0.0175507897 -0.0632302949 -0.0617808867 0.0154621664 0.1048109873 0.1624957152 -0.0711649076 0.0234513338 0.0949684392 -0.0506607334 -0.0247047562 0.1839579989 -0.0287587934 0.1489425523 -0.1402513988 0.0243846564 -0.1623277842 -0.0500641047 0.0490722425 -0.2665639700 0.1137500248 0.0055160876 -0.0376828539 -0.0506857944 0.0528326997 -0.2795809321 0.0991782224 0.0393731506 0.0275008932 -0.0247492275 0.0401211429 -0.0558618434 -0.0466702603 -0.0654280390 0.0512536718 0.0041166735 0.0818623376 0.0989670407 0.0854366668 0.0849975182 -0.0069780325 -0.0026615947 0.0442118790 0.0905245717 0.0746294371 0.1160890433 -0.0216286906 0.0667354340 -0.0800479814 0.0014777420 0.0424042392 -0.0402573643 0.0056328507 0.0931236698 -0.0193364116 -0.0704244930 -0.0847995700 -0.0302535319 0.0088538287 0.0082409481 -0.0011716538 0.0142474306 0.0097138265 -0.0025038711 0.0068505114 0.0046067764 -0.0034652575 0.0076140427 0.0064839951 -0.0021821951 -0.0043372614 0.0000335343 0.0011071415 -0.0056001307 -0.0044262030 0.0004182009 0.0004663359 -0.0061022576 -0.0009553407 -0.0161831648 0.0008530047 0.0024541795 0.0613508940 -0.0014008479 0.0112037711 0.1701485940 -0.0879633398 0.0146187732 0.1214032802 -0.0820758305 0.0214885010 -0.0045830354 0.0208638751 -0.0022211937 0.0026345899 0.0109672084 0.0042967159 0.0303591096 0.0165060281 0.0120974761 0.0066805552 0.0261860429 -0.0279195501 0.1640419139 0.1410918150 0.0801951228 0.1063633252 0.0274567155 0.0513254702 0.2071137126 0.1482393036 0.1091081460 0.0159456259 0.0413552359 0.0387386792 0.0249318494 -0.0268399777 0.0051218305 -0.0169698358 -0.0112856864 -0.0155791090 0.0016740441 -0.0027136210 0.0154158716 -0.0028168146 0.0138132332 -0.0122509637 0.0227279143 -0.0033169369 0.0114945424 0.0161907112 0.0109024890 0.0006348552 0.0004163290 -0.0009044127 0.0030519110 -0.0033626429 -0.0003706103 0.0038613362 -0.0149057921 0.0051708942 0.0080942855 -0.0009085429 -0.0111607074 -0.0063625590 0.0022113404 -0.0079967993 -0.0032606072 -0.0042247696 0.0065588140 0.0084901789 -0.0182422167 0.0080637967 0.0031907369 -0.0014727797 -0.0107788119 -0.0119505897 0.0016296536 -0.0101327190 -0.0046682630 0.0033193871 0.0080320569 -0.0054454158 0.0041751437 0.0013087810 -0.0030839031 -0.0015124032 0.0081038455 -0.0274603082 -0.0011060409 -0.0011785810 -0.0007973056 0.0000887632 0.0013261118 -0.0009866390 -0.0007136488 -0.0016381998 -0.0007539260 -0.0026177560 -0.0005391599 0.0007941039 0.0004539886 0.0010534730 0.0008836586 0.0022404281 -0.0002466443 0.0000534017 -0.0018887971 -0.0009439153 0.0000366009 -0.0036971408 -0.0013904897 -0.0015222842 0.0026989070 -0.0001358088 0.0008125528 0.0027501260 0.0003256692 0.0013821506 -0.0020438942 0.0005286921 -0.0017002775 0.0118050806 0.0019374619 -0.0023290149 0.0102264660 -0.0028793364 -0.0254093711 0.0002019445 0.0586279256 -0.0155382340 -0.0019067691 -0.0170919876 -0.0166559674 0.0003110543 -0.0046910647 -0.0076964961 -0.0117276643 0.0096720719 0.0106869302 0.0026360903 0.0009630846 -0.0006729930 0.0010790482 -0.0032548597 -0.0013208129 -0.0002965566 0.0006004911 -0.0021171826 0.0010101765 0.0036064870 0.0032438496 0.0100197063 0.0083089299 0.0032182440 -0.0034283859 0.0121389607 0.0089308614 0.0063158258 -0.0055410881 0.0018591599 -0.0003303377 0.0007373930 -0.0017358167 0.0035398619 -0.0025310426 0.0003119373 -0.0004742953 0.0003795652 -0.0002361709 0.0002235802 0.0015021952 0.0025254962 0.0037632229 0.0039454577 -0.0057938944 -0.0018972377 0.0007107404 0.0023306176 -0.0017049808 0.0081721108 0.0092462426 -0.0024019430 0.0001860158 0.0010581753 -0.0098306675 0.0161028111 0.0126327805 -0.0079840520 -0.0044548361 -0.0001776385 -0.0104812341 0.0174409321 0.0150991184 -0.0041639561 -0.0370733098 0.0128973592 -0.0428642369 0.0049813918 0.0161262106 -0.0281823171 0.0450929566 0.0034678233 -0.0402324535 -0.0140799276 0.0367379041 -0.0280196645 0.0324401454 -0.0129370996 -0.0495457101 -0.0187323909 -0.0123949681 -0.0603898049 0.0628118796 -0.0534484706 -0.0112287705 0.1216170972 -0.0496009866 0.0045928513 -0.0190378406 0.0000983011 0.0245031234 0.1020411028 -0.0637548952 -0.0380323962 0.0425473951 -0.0484776194 -0.0437609048 -0.0057672361 -0.0681757874 -0.0352432561 -0.0602295935 -0.0254632655 -0.0889882786 0.0166524657 -0.0289147484 -0.0848325472 -0.0754583623 0.0013740271 -0.1038878990 -0.0291010859 -0.0076555168 -0.0369128558 -0.1271248365 -0.0243374138 0.0417862293 -0.1661226510 0.0350449570 0.0178664692 0.0186904200 -0.0169658791 -0.0357884186 -0.1902929969 0.0372622559 -0.0997657370 -0.1702881590 -0.0469988813 0.0446692948 -0.0046977304 0.0003341096 0.0197455204 -0.0123021159 -0.0190084538 0.0607660864 0.0084493607 -0.0133244942 0.0675664608 0.0404851233 0.0441730695 0.1107181054 -0.0515766685 -0.0094844446 -0.0043356659 -0.0394410925 0.0138098511 0.0428396485 0.1053582917 -0.0484696222 -0.0176425811 0.0575101787 -0.0168846603 -0.0340134636 0.1160048970 -0.0274119866 0.0562538463 -0.0779717547 0.0315188155 -0.0690449237 -0.0677476345 0.0533816482 -0.1531579687 0.0530315015 0.0006108935 0.0036449522 -0.0738080660 0.0400383322 -0.1384659799 0.0736030995 -0.0219075415 -0.0224778323 0.0600206353 -0.0459421372 0.1041963668 0.1130995324 0.1288996814 -0.0527318767 0.0486355763 -0.1594821095 -0.1827575005 -0.1416057348 -0.1560388698 0.0560843281 0.0643726252 -0.0824312913 -0.1679352499 -0.1542777190 -0.1583596080 0.0234073866 -0.1424705294 0.1482669468 -0.0191199134 -0.0883450239 0.0456227865 -0.0207656206 -0.1967684111 0.0270752284 0.1285414235 0.1466633219 0.0193277444 -0.0195951524 -0.0164418251 0.0029485228 -0.0448601256 -0.0237629382 0.0098455891 -0.0084385247 0.0043005172 0.0106233194 -0.0214551170 -0.0084280334 0.0090474987 0.0217673002 -0.0055437042 -0.0061612654 0.0186797828 0.0023314905 -0.0013046555 0.0124181308 0.0112467569 0.0048448478 0.0514247123 -0.0047780084 -0.0136927081 -0.0016182666 -0.0073367937 -0.0021797710 -0.0022810558 -0.0057555873 0.0113211852 0.0004928280 -0.0087231145 0.0039582623 0.0023662592 0.0050058019 0.0074385193 -0.0017121605 -0.0037715550 0.0019238767 0.0068421467 0.0035597765 -0.0002223674 0.0069011740 0.0022621032 -0.0006035286 0.0139497988 0.0126697894 0.0034371958 0.0083348030 0.0070401835 0.0030196120 0.0165747852 0.0112976618 0.0021738479 -0.0030179852 -0.0027440213 0.0052303078 -0.0017674462 -0.0027957040 -0.0036455774 -0.0001487074 0.0022389823 -0.0003204217 0.0052142981 0.0004879399 0.0040490520 0.0047707123 0.0028594695 -0.0046250574 -0.1079940542 -0.0063863045 -0.1203953984 -0.0701755318 0.0128822581 0.0346158056 -0.0131539685 0.0629056908 0.0139924074 0.0052430685 -0.0338743892 -0.0319579119 0.0783434204 0.0152176154 -0.0320853082 -0.0096131188 0.0552378133 0.0359645391 -0.0492014487 0.0052042482 0.0373225682 0.0188927261 -0.0196716901 -0.0405538151 0.0985108209 -0.0157968939 -0.0065815107 0.0406568353 0.0347499850 0.0146513238 -0.0430483005 0.0215431472 0.0521251600 -0.0007296966 -0.0671582948 0.0095759088 0.0038741102 -0.0051463876 -0.0022906173 0.0676169914 -0.0725187213 0.1802837500 0.0114723887 -0.0131417631 0.0112699467 -0.0027774531 0.0107618342 0.0193224185 0.0052135312 0.0061394686 0.0090187129 -0.0018945646 -0.0069224050 0.0068444329 -0.0146437688 -0.0054336400 -0.0098358446 -0.0068465406 0.0112345435 -0.0099337591 -0.0087770971 0.0141781282 0.0050577136 0.0039726552 -0.0006283796 0.0185922611 -0.0124928964 -0.0091544405 -0.0273969889 -0.0157341945 0.0033059089 -0.0315883530 0.0103050894 0.0127169730 0.0323224551 -0.0058402861 -0.0275256936 -0.0018996077 -0.0024503686 -0.0052922441 0.0101837249 -0.0010081932 0.0073308991 -0.0015395293 0.0071286284 0.1460304137 0.1496154004 0.0097143701 0.0441665270 0.0712342032 0.1056922391 -0.0785959484 -0.0898914711 -0.0119914937 -0.0060075737 0.0036590323 -0.0345457602 0.0547576497 -0.0112091492 -0.0047375345 -0.0179949900 0.0480536454 -0.0080423448 -0.0459031397 -0.0430339109 -0.0763251794 -0.0687647784 -0.0320129556 0.0295380536 -0.1092490937 -0.0800939995 -0.0465726744 0.0622555161 -0.0194543216 -0.0336430525 0.0354993242 0.0057748383 -0.0637626320 0.0514050497 -0.0281136390 -0.0148673172 -0.0262552745 0.0348987637 -0.0079246321 -0.0191155679 0.0260500157 -0.0224048550 -0.0478763748 0.0778475585 0.0172518292 -0.0229464921 -0.0416488951 0.0143778066 -0.0841313639 -0.0951650722 0.0169797340 -0.0203672584 -0.0272513905 0.0812166037 -0.1386972008 -0.1070478015 0.0667747207 0.0252827166 -0.0053050002 0.0872613415 -0.1504862460 -0.1303532092 0.0023169327 0.0031443309 -0.0002559246 -0.0013434795 0.0040773363 0.0023923682 -0.0034811020 -0.0015215054 -0.0002910655 -0.0012731387 0.0021304597 -0.0038314315 -0.0017487743 -0.0024918390 -0.0021016144 0.0006900493 0.0021989631 0.0004572044 -0.0009320602 0.0020738434 0.0048829263 -0.0022108890 -0.0061958942 0.0008056229 0.0013107508 0.0016717809 0.0003130428 -0.0063649067 -0.0080687162 0.0016574548 -0.0044952866 0.0010868621 0.0060278536 -0.0032614980 -0.0034757902 -0.0053365662 -0.0023288274 -0.0091379220 -0.0019551379 -0.0068273887 -0.0007627355 -0.0025012959 -0.0086897123 -0.0040945318 -0.0016433042 -0.0080982176 -0.0053679906 0.0003223354 -0.0060619196 -0.0103303340 -0.0026767817 0.0011401813 -0.0132102183 0.0010107515 0.0022605394 0.0015177482 -0.0007611989 -0.0055579327 -0.0098486450 0.0000283001 -0.0062435748 -0.0195765989 -0.0020514985 0.0003353749 -0.0001682455 0.0008795088 0.0023143899 -0.0006987724 -0.0001515418 0.0059329042 0.0000066150 -0.0006793728 0.0063976234 0.0032868441 0.0041054756 0.0042794225 -0.0014360687 -0.0021859181 0.0003693223 -0.0007950389 -0.0032604340 0.0032497457 0.0061761876 0.0004302175 -0.0007807645 0.0000010114 -0.0040488371 0.0029074796 0.0086556700 0.0065182685 0.0023483558 -0.0064954757 -0.0031060694 -0.0029968160 -0.0030393084 -0.0001338072 -0.0048448850 0.0019907606 0.0030934386 -0.0010416012 -0.0016132922 0.0035432156 -0.0031209592 0.0053519932 0.0106475695 -0.0012813568 0.0052245169 0.0006446745 0.0074059139 0.0082441393 0.0131893175 -0.0036922757 0.0073817990 -0.0143842925 -0.0155136814 -0.0104746945 -0.0150144956 0.0068100383 0.0064518048 -0.0119718824 -0.0108511708 -0.0153829837 -0.0138463067 0.0014562288 -0.0158499238 0.0133157511 -0.0043340198 -0.0067722084 0.0007111950 0.0022797675 -0.0210788471 0.0035660122 0.0104935475 0.0148589317 -0.0023392124 0.1611877267 0.1325759314 -0.0240258436 0.3957377046 0.2024228795 -0.0897126742 0.0559044341 -0.0630503953 -0.0924619405 0.1860701961 0.0562341423 -0.0833934833 -0.1996365468 0.0572217323 0.0567545636 -0.1401713840 -0.0189255302 -0.0125496489 -0.1467340253 -0.0681587508 -0.0417331038 -0.4298417999 0.0451210648 0.1249020686 -0.0417671497 -0.1564537858 -0.1017249985 -0.1240850192 0.0188727418 0.3005583023 -0.0507389799 -0.0725705424 0.0742807092 0.0719980646 0.0408241776 0.1577547667 0.0097586734 -0.0794118725 0.0400670210 0.0361144366 0.0598842320 -0.0449986630 0.1494942322 -0.0407680297 -0.0081111352 0.0309899517 0.0601416763 -0.0990258570 -0.0874206667 0.1634304361 0.0073560410 0.1207455491 -0.0682874774 -0.2756729083 -0.0737631197 -0.1336295051 -0.0169760096 -0.0756221790 0.0871649047 -0.0523806654 0.0537438530 0.0348326100 0.0335363050 0.0173513933 0.0017395515 -0.0481910772 -0.0104903659 -0.0294568240 0.0341062035 -0.0082512527 0.0042265608 0.0034336160 -0.0072173464 -0.0220976057 -0.0039080434 0.0035458010 -0.0136611762 -0.0055298325 0.0066553693 0.0058949619 0.0039155674 0.0056505592 -0.0113852956 -0.0085832637 0.0017860189 0.0053133408 0.0001723536 0.0071861898 0.0107245330 -0.0024225138 0.0024895794 -0.0046655818 -0.0065944944 0.0085702913 -0.0103020500 -0.0027038081 -0.0106540260 0.0103813491 0.0090940740 0.0042551535 0.0130585178 -0.0065194339 -0.0061830143 0.0030536793 0.0048828890 -0.0059357929 0.0023689771 0.0073304422 -0.0115167586 0.0067970913 0.0074460737 -0.0017731223 0.0077035711 -0.0004043605 0.0008339583 -0.0077093260 -0.0031142497 -0.0020233395 0.0024573146 0.0002498189 0.0071526268 0.0022750477 -0.0045412326 0.0032712618 -0.0027254158 -0.0001389607 -0.0065752547 -0.0024113381 0.0035039119 0.0067032244 -0.0025966801 0.0002828328 0.0090633987 -0.0007259925 -0.0003783893 -0.0014109462 0.0009413401 0.0071497761 -0.0048438582 0.0004579654 0.0076926537 0.0050299931 -0.0054687893 -0.0035663653 -0.0185856487 0.0041216661 0.0026123841 -0.0095239094 0.0007876250 0.0737882787 0.0341504005 -0.0450966025 0.0176835852 -0.0006988912 -0.0070404945 -0.0082665839 -0.0012912875 -0.0019294828 -0.0065088522 -0.0048382003 0.0038718058 0.0053356499 -0.0020704875 -0.0009179090 -0.0006552889 0.0051832584 -0.0068114370 0.0055249454 0.0024198710 0.0021627176 -0.0081464193 0.0002489348 0.0069776682 0.0063500969 0.0048045323 0.0033748654 0.0018262245 -0.0014063253 0.0052409912 0.0039630329 0.0009718153 -0.0078075507 0.0035403624 0.0069534980 -0.0073461736 0.0016738796 0.0111429332 -0.0066992787 0.0085588347 0.0107574156 0.0091209052 -0.0005165579 0.0023195914 -0.0015567720 -0.0118593273 -0.0045811946 0.0088908338 -0.0122902448 -0.0007335504 0.0075621370 0.0113393892 -0.0006295564 0.0083614070 0.0111272129 -0.0000203456 0.0031318234 0.0048454653 -0.0045212568 0.0071232355 0.0056493920 -0.0036312531 -0.0023327995 -0.0004871582 -0.0051125030 0.0080708546 0.0072610921 0.0394981216 0.0586818798 0.0374809911 -0.0491385534 0.1408934243 0.0734553280 -0.1189668481 -0.0331358472 -0.0404556007 -0.0280136564 0.0019924218 -0.0729423731 0.0141157143 -0.0960660524 -0.0570151605 0.0949137310 0.0561462337 0.0568415865 -0.0181187777 0.0988687070 0.1312555009 -0.0769224309 -0.1905839635 -0.0091482924 0.0088284790 0.0172600182 0.0012262793 -0.1039869912 -0.1765522070 -0.0209500648 0.0012551185 0.0809808986 0.1407275492 0.0072470281 -0.0600376082 -0.0117607653 -0.0431164059 0.0414065011 -0.0373997457 0.0166636435 -0.0789868820 0.0093519051 -0.0316131849 0.0401423769 -0.0176345453 0.0153948527 -0.0488034064 0.0148256061 -0.0671504642 0.0350672584 -0.0400858902 -0.1204496561 0.2082490644 -0.0851536831 0.0050870422 -0.0200265501 0.0245047038 -0.1095426782 0.2320156866 -0.0743108228 -0.0616399359 0.0751561164 -0.0326801204 -0.0001040880 0.0005942820 0.0098961024 0.0335882473 -0.0175283971 -0.0061185163 0.0228962662 0.0200810205 0.0050952827 -0.0060620431 0.0116147877 0.0085267685 0.0082161658 0.0090299184 -0.0573172464 0.0175299838 0.0138485492 -0.0577866879 0.0237615363 0.0527403872 0.0115157570 -0.0173364323 -0.0283861870 -0.0349687159 0.0737371447 0.0908135222 0.1095510434 0.0068024948 -0.0572827075 -0.0012737965 -0.0163007777 -0.0140423568 -0.0152987202 -0.0121201341 -0.0064744654 0.0346842442 -0.0295917634 0.0197427387 0.0699045250 0.0102857444 0.0393758742 0.1514511376 0.0028408463 -0.0003309944 0.0766832334 -0.0187508833 -0.0035283837 0.0646306533 0.0008862112 0.0567210219 -0.0257371349 -0.0123176500 0.0119119249 -0.0464868396 0.0511827322 0.0097851747 -0.1016373694 0.0742653261 -0.0632363430 -0.0479671359 0.0011630960 -0.0839319223 0.0403466545 -0.0487514419 0.0084941854 -0.0353669757 0.0986326686 -0.1122394683 0.0235696046 0.0239036086 0.0600352077 -0.0617860812 -0.0087135154 -0.0071554847 0.0010340560 -0.0202361751 -0.0115977496 0.0050012804 -0.0036868193 0.0021988025 0.0044396891 -0.0094265888 -0.0018287131 0.0049765039 0.0099800181 -0.0038105140 -0.0027346049 0.0037152155 0.0062055786 0.0054723879 0.0123593896 -0.0042626486 -0.0022114597 0.0180414454 -0.0054725034 -0.0020636138 0.0008602072 -0.0006960653 -0.0028839146 0.0021179707 0.0030321810 0.0042650738 0.0007929276 0.0015474739 0.0003016727 -0.0000277131 -0.0001850405 0.0020875336 0.0007670881 0.0004590535 0.0006996535 -0.0001738743 -0.0010848976 -0.0009142699 0.0000315037 -0.0013026342 -0.0001004486 0.0018000365 -0.0000947676 -0.0006516979 -0.0026943531 0.0016055730 0.0021937688 0.0062751187 -0.0026558472 -0.0030785972 0.0020550274 -0.0023628619 -0.0026901750 -0.0001400477 0.0032064472 0.0011124332 0.0001707234 -0.0002841575 0.0006388413 -0.0016928087 0.0005627175 -0.0008788267 -0.0000391627 -0.0012314496 0.0014383685 -0.0639328461 -0.0006285000 0.0889053903 -0.0116050459 -0.0311535329 0.0009558296 0.0042749828 -0.0131939807 -0.0100511897 0.0032697872 0.0159367100 0.0008736150 0.0097519338 -0.0150311545 -0.0103015918 0.0052645787 0.0213594428 0.0052636582 0.0127345384 0.0249242797 -0.0011051239 0.0034127421 -0.0073356796 -0.0068919624 0.0141107632 -0.0138814851 -0.0020773785 -0.0098488873 0.0270724841 0.0298121695 0.0197435111 0.0194621257 0.0077611401 -0.0351519001 -0.0266895031 0.0306793155 -0.0524661962 -0.0397687288 -0.0097447829 -0.0532989823 -0.0402384917 -0.0159317182 -0.0979877752 -0.0740443123 0.0378366009 0.1108584658 0.0758370079 -0.0262133381 -0.0492181307 -0.2980311734 -0.0111787795 -0.2635911049 0.1018143901 0.1312067885 0.0790546009 0.3450790996 0.0068638279 0.3071606435 -0.0953585418 -0.1539431522 -0.1837545699 -0.2132886067 0.0387439653 -0.2651229105 -0.0584806045 0.1050530089 0.1956390516 0.2695128098 -0.0697489885 0.3061945296 0.0524891340 -0.1539777092 -0.2422765295 -0.1425325746 0.0993688560 -0.0120376609 -0.0079341099 0.0040656471 -0.0159399754 0.0059030744 -0.0039468155 0.0007487715 -0.0006423013 -0.0018226183 0.0022830619 0.0056178762 -0.0023395626 0.0003527805 -0.0000498114 -0.0004857303 0.0013676407 -0.0025422599 -0.0012399796 -0.0028955224 -0.0011868459 -0.0004559176 0.0029877575 -0.0045419739 0.0014169943 0.0044213630 0.0031795433 -0.0028110977 -0.0009098310 0.0031176629 0.0042157736 -0.0019637556 -0.0000158525 -0.0003787624 -0.0000665383 -0.0001434898 -0.0002959259 0.0041568423 -0.0034313681 0.0008017967 0.0026172849 -0.0022541177 -0.0000724030 0.0073506017 -0.0074646375 0.0014222975 0.0099287550 0.0070583586 -0.0079240942 0.0079641886 -0.0095575676 -0.0035115431 -0.0038806064 0.0084316427 -0.0051535479 0.0019532249 0.0060200060 0.0041291326 0.0009301691 0.0005147348 -0.0011989100 0.0015673658 0.0090726531 0.0074926132 0.0011939102 -0.0005570119 -0.0002786959 0.0002674992 0.0022022954 0.0001221926 0.0009621087 -0.0012163520 -0.0013031441 -0.0003704870 -0.0009540607 0.0035299193 -0.0023396714 0.0036988581 0.0021613802 -0.0036445856 0.0004895300 -0.0040615727 -0.0009232453 -0.0027269483 -0.0003605145 0.0024112891 -0.0026329091 -0.0026795959 0.0039698120 0.0004996776 0.0026183874 0.0003657092 0.0046495269 0.0019838466 -0.0024810552 -0.0016495624 -0.0042222379 0.0011798563 -0.0013322716 -0.0002284378 0.0015949092 0.0001616364 -0.0057268725 0.0035794688 0.0047810851 0.0012480415 -0.0015506720 -0.0020001810 -0.0039998424 -0.0038945501 -0.0011747958 0.0017665535 -0.0003567420 -0.0000749055 0.0018107246 0.0017232320 0.0019875733 0.0034930186 0.0042784927 0.0015082443 -0.0023089739 0.0002094215 -0.0000194810 -0.0048492608 -0.0029943888 0.0006419117 0.0033051949 0.0000426501 0.0003063004 -0.0000813776 -0.0007991188 0.0015926651 0.0038603344 0.0026285348 0.0018036203 -0.0040504694 -0.0033455271 0.0005863437 -0.0001142753 0.0000456773 0.0004396548 0.0015503877 -0.0002550569 -0.0002937744 0.0003470463 0.0000236239 -0.0001567123 0.0002057294 -0.0003531988 -0.0005460892 -0.0004410846 -0.0006842056 -0.0004357930 0.0000258731 -0.0002276437 -0.0007859704 0.0002119345 0.0003166773 0.0001010711 -0.0000836658 -0.0005680445 -0.0003855019 0.0011733538 0.0002085107 0.0009285440 0.0006852691 -0.0001697112 0.0005671290 -0.0000054986 -0.0000291448 0.0002414421 -0.0002820201 0.0004904527 0.0009142434 0.0009629574 -0.0002191495 0.0000467282 0.0006067734 0.0001938263 0.0003783769 -0.0000508265 0.0000270814 0.0009256690 0.0004970351 0.0008971767 0.0004224882 -0.0007510361 -0.0010894271 0.0000733304 0.0001741840 0.0018426247 0.0003344761 -0.0005865775 -0.0018566797 0.0001103808 0.0012252575 -0.0007404947 -0.0000041256 0.0006546728 0.0005207890 -0.0007227519 -0.0004890480 -0.0011594489 -0.0001424059 0.0002202427 0.0019828281 -0.0008525794 -0.0012943323 0.0063072588 0.0095890363 -0.0036322400 0.0077087164 0.0081559014 -0.0027446576 0.0055498984 0.0079767818 -0.0046000990 -0.0002813122 0.0093715329 -0.0025944014 0.0003923024 -0.0008379603 0.0007230048 -0.0066382242 -0.0032287383 0.0047678548 0.0095603141 -0.0080686381 0.0014250395 -0.0038755964 -0.0026187234 0.0037652124 0.0045186734 -0.0599898626 0.0809087307 -0.1758363558 -0.0068522679 -0.0798783371 -0.0727779888 0.0048920537 -0.0353278551 -0.0117530891 -0.1499858682 0.0841995982 0.0723444622 -0.1188472474 -0.0245174204 -0.0986869702 -0.0343732551 -0.0217913735 -0.1015167545 -0.0922735675 0.1429279625 0.0270382201 0.1272983076 -0.0537395922 -0.0131091476 -0.0101157084 -0.0691257814 -0.0052615605 0.1461909489 -0.0362637645 -0.0163695044 -0.0135449905 -0.0573367584 0.0491340096 -0.0240316437 -0.1095649061 0.0246108635 0.0650583438 0.0620282090 -0.0060391932 -0.0193357782 -0.0383236950 0.0318719460 -0.0387431393 0.0396922622 -0.0249416148 0.0070172590 -0.0199715968 -0.0186557099 -0.0173939797 -0.0093322743 -0.0028728642 -0.0070606670 -0.0096132461 0.0074685924 0.0004837060 -0.0012990343 0.0140755439 -0.0109252844 -0.0094580431 0.0033639626 0.0032657467 0.0095973243 -0.0002812381 0.0091927424 -0.0039228951 0.0065989370 -0.0061947967 -0.0079559084 0.0218374491 -0.0182945874 0.0019445566 -0.0011862889 0.0046648381 0.0203970296 -0.0056912068 0.0174326229 -0.0100224234 -0.0023689923 -0.0050854030 0.0081506246 -0.0041303802 0.0056910085 0.0067187006 -0.0036009264 0.0037023619 0.0251826693 -0.0044551979 0.0078763162 0.0036173711 0.0051215392 -0.0084644196 -0.0023026630 -0.0060745273 -0.0039990164 0.0028276202 0.0029624449 0.0043336534 -0.0009597710 0.0052249453 0.0045635928 -0.0029998452 -0.0043391992 -0.0038660020 0.0000656807 0.0003482903 -0.0078226079 0.0019518320 0.0054611226 -0.0055567583 0.0036540422 0.0013384313 0.0075334436 0.0020703976 -0.0038070523 0.0063652674 0.0015996105 0.0048318395 -0.0099979945 0.0017529902 -0.0247614375 0.0100392117 0.0036220225 -0.0195926621 0.0095294232 0.0524523024 -0.0357029658 0.0106587341 0.0224327823 -0.0027601129 0.0008552327 -0.0023664565 -0.0006827997 0.0016165845 -0.0096118680 0.0013392841 0.0014583073 0.0042861868 -0.0139313483 -0.0057843624 -0.0001943944 0.0173088387 -0.0219446177 0.0099310634 0.0032574285 0.0089548468 -0.0282176296 -0.0019472141 0.0198998455 0.0192179966 0.0083420549 0.0011698793 -0.0003688584 0.0002665231 -0.0007243762 -0.0002964454 0.0085054745 -0.0186852737 0.0042730294 0.0205800357 -0.0237109239 0.0037288065 0.0303292633 -0.0318759877 0.0093967008 0.0104822407 0.0160241943 -0.0186982902 0.0015114247 0.0208766616 -0.0202685846 -0.0021334617 0.0289941360 -0.0442659197 0.0015630711 0.0285700916 0.0373250002 0.0011647386 0.0142613218 0.0213816927 0.0036564223 0.0152278164 0.0192061246 -0.0036196533 0.0020778296 0.0022532764 -0.0020986391 -0.0087753277 -0.0052085689 -0.0043504795 0.0031444716 0.0039521129 0.0137509817 -0.0109159215 -0.0537733294 0.0915219629 -0.0381588797 -0.0890778968 0.0914291414 -0.0204724409 0.0998946810 0.0019238321 0.0868867123 -0.0099305571 -0.1240177491 0.0419423441 0.0956545603 -0.1259916026 0.0468638701 -0.1160399140 -0.0048039887 -0.1127108684 -0.0424133407 0.0199904821 -0.1244874518 0.2256429089 0.0095718808 0.0245712531 -0.0056824569 -0.1203232426 -0.0932413243 0.2298918492 -0.1383969428 -0.0026073595 -0.0834655820 0.0451018864 0.0720063747 0.0989953845 0.1098280454 0.0259655820 -0.0085747761 0.0215484334 0.0333570101 -0.0298370826 -0.0174744078 -0.0454208006 -0.0780445361 -0.0772800041 -0.0193309470 0.0224305869 0.0466839149 0.0493260610 0.1069165942 0.1066385639 -0.0469082128 -0.0309016632 0.0001355528 0.0026329108 -0.0089399770 0.0317762606 -0.0792420617 -0.0714453641 -0.0320699540 -0.0193221200 0.0737977327 0.0164972025 0.0012772736 0.0186012633 0.0216609902 -0.0088007938 0.0048852383 -0.0177675967 -0.0095080342 -0.0061827876 -0.0045055755 -0.0117749171 -0.0190829061 -0.0552603526 0.0202549564 0.0028798843 -0.0981376717 0.0251507680 -0.0051773428 0.0371903148 -0.0830720354 0.0651119882 0.1071745138 -0.0292726969 -0.0499432470 0.0446104469 -0.0720433367 0.0903027941 0.0724819775 0.0084388624 -0.1057329961 -0.0588479993 0.1503936944 -0.0839911330 0.0386844122 0.0307016346 0.0208541315 -0.0759438198 0.1519772770 -0.0831170264 -0.0486923764 -0.0868854817 0.1499946963 0.0781872967 0.0124517346 0.0570732447 0.0729942663 0.0056963554 0.0458334757 0.0639857959 0.1304271678 -0.0567898606 -0.0487258603 0.0136534095 -0.0396305981 0.0058587632 0.1604828093 -0.0172439557 -0.1118974944 -0.0304451533 0.1236764684 -0.0348884149 -0.1079781914 0.0892098117 -0.0179812015 -0.0442635199 -0.0683275068 -0.0970864380 -0.0676468079 0.1423235817 0.0185951750 0.0732242949 -0.0605593423 -0.0019152391 -0.0014455589 -0.0003876804 0.0012819223 -0.0041577146 0.0014978228 -0.0043385142 -0.0066334738 0.0010655139 0.0045497095 0.0021041663 0.0008193099 -0.0026526550 0.0021506099 0.0005884857 -0.0076891893 0.0043921770 0.0050646710 -0.0007083329 0.0010109158 0.0007948517 0.0034159598 -0.0019002832 0.0046410439 0.0467772630 0.0323850261 -0.0539943954 0.0681458608 0.1286957646 0.0186836539 0.0186538441 0.1119241169 -0.0298845694 -0.0298053424 -0.0656791247 0.1059070738 0.0531868870 0.0086526168 0.0285746323 -0.0307383088 -0.1033581025 -0.0384017335 -0.0332528806 -0.1146020649 0.0332853959 0.0721193570 0.0095523566 0.0176314458 -0.0545260350 -0.0360764835 0.0637067110 0.1877914699 -0.0126631245 0.0276501103 0.0429460609 0.0268380649 -0.0814301808 0.0564362346 -0.0230245824 -0.0088066648 -0.0506575639 0.0141291626 0.0082410294 -0.0323289239 -0.0223787116 0.0245680524 0.0334379115 -0.0041893051 -0.0138611550 0.0030997342 0.0021133658 0.0035169531 0.0018685747 0.0031157994 -0.0043528708 -0.0026962238 0.0010917475 -0.0059304906 -0.0031941325 0.0008731107 -0.0010055656 -0.0021382812 0.0001274435 0.0031111475 0.0029621083 -0.0021780979 0.0031131018 -0.0018661607 -0.0007754623 -0.0019427390 -0.0005587011 -0.0024562623 0.0056818395 -0.0011658190 0.0005616350 0.0051565681 0.0060241007 -0.0039069560 0.0088435388 -0.0017490818 -0.0030243863 -0.0027091892 0.0029905461 0.0022021740 -0.0005365139 0.0015529552 -0.0016598001 -0.0027558130 0.0022816522 -0.0017217215 -0.0083111606 0.0035689054 -0.0018363211 -0.0017220935 -0.0036981039 0.0019018177 0.0016469897 0.0035028734 0.0063479570 -0.0007631721 0.0033213226 -0.0032133115 -0.0015075742 -0.0033910430 -0.0072986105 0.0008002050 -0.0033034451 0.0029220930 0.0022406066 0.0029915327 0.0065107673 -0.0020462637 0.0021600931 0.0040754273 -0.0032476410 -0.0036769278 -0.0074131060 -0.0009258862 -0.0039112748 -0.0035087848 0.0005841393 0.0019224558 0.0059955548 -0.0021942570 -0.0024086387 0.0015756299 0.0018496138 -0.0085937243 0.0122950749 -0.0541823771 0.0224159453 -0.0081446704 -0.1065783703 0.0012807344 -0.0001988175 -0.0002945560 -0.0000799210 -0.0008853494 0.0015765180 -0.0005315440 -0.0006477119 -0.0004524006 -0.0000044673 -0.0000254306 0.0008258274 0.0001588168 0.0001662937 -0.0041565609 0.0002093210 0.0001913779 -0.0010898932 -0.0000599853 -0.0000320337 0.0001430272 -0.0007974523 0.0000133816 -0.0000047433 -0.0001455674 0.0006187755 0.0003356603 0.0066115561 -0.0048075977 0.0019787133 -0.0019883414 -0.0003122812 0.0030280909 -0.0029442377 -0.0008178539 -0.0063760481 -0.0039045040 -0.0033244075 -0.0068725347 -0.0007970824 0.0069489368 0.0029656964 0.0031440874 -0.0012049988 -0.0005766354 0.0001717393 -0.0000895200 -0.0007869266 0.0000052735 -0.0001703251 -0.0004703174 -0.0000482314 0.0007571842 0.0004613703 0.0000771348 0.0002680976 -0.0000176878 0.0000806329 0.0009748748 0.0007704302 0.0003295565 0.0000620840 -0.0001473001 0.0126676261 0.0067708143 0.0187025626 -0.0396666755 0.0461669060 0.0390125628 -0.0566271556 0.0056887076 -0.0227559511 -0.0176382466 -0.0129672684 -0.0097829620 0.0235452999 -0.0304066087 -0.0353816545 0.0389735640 -0.0032010180 0.0284783298 -0.0146411914 0.0771675532 0.0140124840 -0.0277604426 0.0071158279 -0.0536521504 0.0008573341 0.0000123339 -0.0022696087 0.0131559649 -0.0084116386 -0.0611242916 0.0236890608 0.0342611613 0.0286229277 -0.1066598287 -0.0742170218 -0.2203264297 -0.2049601185 -0.1004587230 0.1185745124 -0.0319905662 0.0491024585 0.0905499167 0.1343952863 0.0855221901 0.2184838247 0.2388795988 0.1338363477 -0.1308478451 0.0436531880 -0.0526201155 -0.2391193164 -0.1067979050 -0.1227403963 0.2290348820 -0.0087983378 0.0248887160 -0.0152920867 0.0457177400 -0.0684054804 0.2773360652 0.2039480536 0.0666729410 -0.1912228575 0.0079308386 -0.0030757282 -0.0000216736 0.0068586859 -0.0075463355 -0.0071035243 -0.0306499789 -0.0178108848 0.0138845388 -0.0025180725 -0.0120135751 0.0071269280 -0.0618569309 -0.0253217703 -0.0083825320 -0.0860600688 -0.0130574399 0.0004005270 -0.0151971056 -0.1083838590 0.0570433862 0.0618260201 -0.0110165402 -0.0272265247 -0.0358406311 -0.0800576298 0.1257835790 0.0216097803 0.0858692623 -0.0204338291 -0.0235331161 0.1068175050 -0.0489527233 0.0396987932 0.0256294498 -0.0080019303 0.0060326940 0.1266063368 0.0063122529 -0.0089970260 -0.0359456967 0.1045360326 0.0332703755 0.0387965019 0.0174402353 0.0281408507 0.0457399705 0.0260018740 0.0490741171 0.0927640569 -0.0324198056 -0.0367822173 -0.0020022041 -0.0107646248 0.0963544977 0.0936409853 -0.0152586219 -0.0308665481 -0.0578568181 0.0733728839 -0.0328007235 -0.0418980203 0.0274615471 -0.0172070345 -0.0389686922 -0.0382329965 -0.0500310550 -0.0508269366 0.0024998185 0.0352272944 -0.0154962371 -0.0609180636 0.0016674253 0.0013459145 -0.0000797664 -0.0000677887 0.0014343660 -0.0000215472 0.0025236328 0.0027609994 0.0006404095 0.0011044309 0.0012369636 0.0000207444 0.0005197184 -0.0010685371 0.0001609743 0.0019982449 -0.0028797361 -0.0016934901 -0.0010420446 0.0023200549 0.0039239644 0.0010414124 0.0021939714 -0.0044409937 0.0575418106 0.0610706021 0.0658258842 0.0399139566 0.0431358571 -0.1642527792 0.0235975920 0.0956973904 -0.0292223596 -0.0146678904 -0.1103863315 -0.0363350236 0.0630690534 0.0328005390 0.0844989183 -0.1067159994 -0.0559449422 0.0353054103 -0.0654731207 -0.0881729444 0.0039325590 0.0144462879 0.0278059329 0.0314159049 -0.0275857254 -0.0652658349 0.0146658660 0.0761442350 0.0414161891 0.0787585808 0.0450058287 0.0758542637 -0.0249588134 0.0655636566 -0.0104126364 -0.0209503208 -0.0246962365 -0.0328488664 -0.0043022260 -0.0329285655 -0.0090819587 0.0190036625 0.0283466532 0.0043661622 0.0025960538 0.0087168591 -0.0056205112 0.0067787141 -0.0048443079 -0.0023929024 0.0007372789 0.0005696014 0.0006451458 0.0011504467 -0.0009728219 -0.0027535324 -0.0000466266 0.0052574095 -0.0003941231 -0.0036686167 -0.0001958421 0.0021499623 0.0010781891 -0.0041177891 -0.0011957252 0.0025008544 0.0008120956 -0.0037316071 -0.0021752837 0.0045570994 -0.0002516995 -0.0052581203 0.0012410999 0.0017016795 -0.0028891677 -0.0045504425 -0.0015127043 0.0015205517 -0.0005969711 0.0000154642 -0.0021825946 -0.0001226137 0.0030692962 0.0011877238 -0.0038162740 0.0064145077 -0.0023024739 -0.0013672229 0.0031794255 0.0004882850 0.0009567411 -0.0032674411 -0.0014825992 -0.0025025065 0.0002618939 0.0007249080 0.0021758767 0.0007774063 -0.0009581548 0.0019367195 -0.0005562052 -0.0000125035 -0.0032076178 -0.0008132152 0.0017774058 -0.0000029341 -0.0013667093 -0.0007477753 0.0015407270 -0.0014527961 -0.0024343926 -0.0004192406 0.0008226789 0.0002369588 -0.0029998310 0.0023957786 0.0023983041 0.0020279076 -0.0021075390 -0.0032851778 -0.0048237402 0.0005608898 0.0018960096 -0.0052775616 0.0145541573 -0.0179655655 -0.0498429381 0.0140405204 0.0232774959 0.0008931184 -0.0012913680 -0.0010522362 -0.0014121319 -0.0003707313 0.0018564700 -0.0013588955 0.0003884366 -0.0006439712 0.0065050315 0.0036893274 0.0015411524 -0.0057297128 0.0097307135 -0.0037975770 -0.0018065748 -0.0022446463 0.0124280622 0.0011101606 -0.0118172782 -0.0110220534 -0.0041943048 -0.0007148814 0.0012330377 -0.0002266903 0.0013148194 0.0008281029 -0.0107273461 0.0102983892 -0.0041167220 -0.0044348083 0.0034150995 -0.0004269597 -0.0170229594 0.0142833277 -0.0059299000 -0.0131724320 -0.0109630089 0.0069890744 -0.0040315154 0.0020682214 0.0019026011 0.0013452614 -0.0150333301 0.0224754047 -0.0011467856 -0.0174409159 -0.0228252935 -0.0010101831 -0.0078921692 -0.0130766580 -0.0024284849 -0.0079993996 -0.0106397591 0.0017917766 -0.0004543272 -0.0008749028 0.0008008437 0.0055232376 0.0029015469 0.0016860747 -0.0002722481 -0.0009504531 0.0288438651 0.0357938030 0.0599591998 -0.1665535655 0.1997146882 0.1044084203 -0.2553873209 -0.0023613714 -0.0920439350 -0.0336287135 -0.0370574169 -0.0529518553 0.1529529812 -0.1629361863 -0.1245200829 0.2238621125 -0.0145033221 0.1030151789 -0.0976513022 0.2470505153 0.0784685335 -0.1972322937 -0.0688328307 -0.1212650241 -0.0008636157 0.0000598105 -0.0205395841 0.0925138330 -0.1521425716 -0.1572637200 0.1653081916 0.0246532068 0.1452822542 0.0772813789 0.1172496666 0.1390289589 0.1760840614 0.0421992742 -0.0024266347 0.0259329080 0.0599254672 -0.0380349706 -0.0393245716 -0.0782328142 -0.1193825049 -0.1224117304 -0.0299746624 0.0134557435 0.1047223199 0.0762582606 0.1510944214 0.1911601928 -0.0821270924 -0.0164090296 0.0035463521 0.0008557057 -0.0171812009 0.0302166325 -0.1741199985 -0.0940335768 -0.0432211933 -0.0734261881 0.0884039409 0.0141301356 -0.0186885387 -0.0148831868 -0.0043489587 -0.0201891354 -0.0221365792 -0.0301052074 -0.0171938837 -0.0148624035 0.0013832872 -0.0145957490 -0.0302635870 -0.0372962617 0.0015520157 0.0107383148 -0.0501449242 -0.0038570202 0.0115831448 -0.0166369464 -0.0711923095 0.0075758322 0.0333435334 0.0045237234 0.0190545769 -0.0297848117 -0.0724778373 0.0034210809 0.0135449086 0.0628032501 0.0366790086 -0.0158074287 0.0764260722 -0.0001745515 0.0087305539 0.0047230132 -0.0311444057 -0.0083240049 0.0785117734 0.0054086181 -0.0338160224 -0.0593265931 -0.0387530766 0.0051974146 0.0199264685 -0.0248632048 0.0291478911 0.0370341466 -0.0096443248 0.0023386336 0.0263024784 0.0000015584 -0.0007857317 -0.0230077803 -0.0023022759 0.0037132649 0.0510157354 0.0493441294 -0.0111663356 -0.0218602355 0.0119019153 0.0095194734 0.0058079305 -0.0001554561 0.0035653054 -0.0166987108 0.0269892124 -0.0401886739 0.0055655094 -0.0197566032 -0.0212255053 -0.0000875842 0.0437599971 -0.0005602975 -0.0001805883 0.0002696884 -0.0037208479 -0.0009470416 0.0011158864 0.0011371235 0.0030425220 0.0008004587 -0.0016014756 0.0004360104 0.0008631374 0.0034052383 -0.0003837051 -0.0015389899 0.0031424391 -0.0051782292 -0.0031451615 -0.0004352564 0.0049424669 0.0022720566 0.0079136178 0.0005353361 -0.0040445414 -0.0070164232 -0.0012484614 0.0160172520 -0.0129636888 -0.0202087677 -0.0126963531 -0.0039427225 -0.0142191379 0.0040303670 0.0029101130 0.0113348879 -0.0076230143 -0.0030923140 0.0035530145 0.0046122025 -0.0002964082 0.0009979357 0.0029622683 -0.0137748027 0.0153114019 -0.0061375591 -0.0014899144 -0.0076739323 0.0116518323 0.0147888613 -0.0144819305 0.0000974982 -0.0122525310 0.0073612494 0.0320896430 0.0039457523 0.0105573678 0.0043334392 0.0029594686 -0.0071126970 -0.0097160371 -0.0019712711 0.0017822167 0.0019045663 0.0019706525 0.0011960231 0.0040146626 0.0055230022 0.0005864344 -0.0031732077 -0.0554387449 -0.0176731587 -0.1014041125 -0.0488988742 0.0059613161 0.0255581342 -0.0176714738 0.0356791067 0.0117821927 0.0109359987 -0.0363198068 -0.0260147292 0.0585958268 0.0067245817 -0.0274906411 -0.0138743462 0.0068062921 0.0204385502 -0.0367725457 -0.0141498990 0.0149077652 0.0287389456 -0.0020320790 -0.0339513529 0.0758799667 -0.0425200786 -0.0169373296 0.0285237449 -0.0109252688 0.0002126797 -0.0374801118 0.0171015057 0.0268586222 -0.0004387029 -0.0438814801 0.0055681292 0.0133721443 0.0404800087 0.0278561208 0.0276799014 0.0202795632 0.1384076600 -0.0233672596 0.0374615633 0.0153298288 0.0229525677 -0.0391634345 -0.0109996142 -0.0390981539 -0.0123957622 0.0183160197 0.0156995871 0.0138295986 -0.0053868160 0.0231582189 0.0116256698 -0.0150115389 -0.0351313901 -0.0101359059 0.0071759709 -0.0084010090 -0.0306019376 0.0203259686 0.0311829262 -0.0393943671 0.0237473463 0.0033431996 0.0273096176 0.0160083927 -0.0300433657 0.0439657113 0.0215547859 0.0390199456 -0.0380518859 0.0091219847 0.0008585558 0.0083217849 0.0038226251 0.0060284467 0.0261195578 0.0138694480 0.0011045189 0.0025429767 -0.0029888945 -0.0114033769 0.0197463851 0.0193885160 0.0194890500 0.0089961031 -0.0303284186 0.0180052664 -0.0043553946 0.0082684249 -0.1109654195 -0.0470287734 -0.0239759007 0.1200399157 -0.1750856118 0.0578856167 0.0064351979 0.0587881839 -0.1879467386 -0.0229785781 0.1674333925 0.1613773700 0.0666154435 0.0086904187 -0.0187953593 0.0044841697 -0.0203286613 -0.0133413092 0.1430281854 -0.1380916813 0.0326064522 0.1153322602 -0.1185826604 0.0088368450 0.2572856285 -0.2727745205 0.0549624178 0.0709543201 0.1095042642 -0.1660440605 0.0255131958 0.0732424979 -0.0057993901 0.1105930792 0.2077383073 -0.3438144753 0.0289568205 0.2636235309 0.3209485237 0.0159934977 0.0990741507 0.1503099046 0.0430893576 0.1453990999 0.1733914956 -0.0247479732 0.0056185240 0.0119723844 -0.0118032662 -0.0851297493 -0.0470479097 -0.0261911603 0.0032724293 0.0148224413 -0.0023851335 0.0011967200 0.0068460038 -0.0113134220 0.0139916756 0.0043089973 -0.0187140479 -0.0045766634 -0.0061443128 0.0005435959 -0.0057845546 -0.0023493383 0.0143520443 -0.0139984649 -0.0068600497 0.0206950485 0.0008175390 0.0076072564 -0.0012823239 0.0191158911 0.0022566552 -0.0174192803 -0.0090681816 -0.0054120313 0.0002263686 -0.0018067143 -0.0007660123 0.0064092011 -0.0191788904 -0.0046738964 0.0179533538 -0.0018023731 0.0112419752 -0.0083367416 -0.0018073884 -0.0105955403 -0.0091822931 -0.0094192448 0.0035023487 -0.0045456811 0.0034017484 0.0011346118 0.0050606554 0.0008412675 0.0095776469 0.0056881301 0.0073989858 -0.0028978612 -0.0038135748 -0.0088114353 -0.0084773785 -0.0008523639 -0.0197023470 0.0106059444 0.0002024908 0.0019137532 -0.0003943923 0.0094349558 -0.0140934369 0.0141026559 0.0087697488 -0.0046291206 -0.0032227470 -0.0014888222 -0.0013736708 -0.0026495699 -0.0030575170 0.0009133438 -0.0005824788 0.0009654553 -0.0001574940 0.0009160913 0.0007900077 0.0001912453 0.0017519182 0.0081461131 0.0033181016 -0.0021317285 0.0099147208 0.0003633371 -0.0021486585 0.0048752333 0.0162909918 -0.0054238510 -0.0061043326 0.0003119285 -0.0008911570 0.0099454330 0.0169623474 -0.0036590269 0.0007636880 -0.0127989426 0.0022582700 0.0020220621 -0.0144176081 0.0037565456 -0.0051200618 -0.0020269415 0.0030824996 0.0005607061 -0.0142294501 0.0041445697 0.0025238541 0.0091192164 0.0010598987 -0.0088513091 -0.0012318135 -0.0150146224 -0.0002859805 0.0044326550 -0.0109211953 -0.0064990310 -0.0209759954 0.0031210419 -0.0003266937 -0.0056909844 0.0058542576 -0.0091626773 -0.0160639954 0.0123072725 -0.0125178302 0.0128315718 -0.0071774515 0.0028555671 0.0197338944 -0.0100466512 0.0101334144 0.0002138030 0.0114373805 -0.0103951908 0.0201167172 -0.0144871183 -0.0009486332 -0.0110387889 0.0146024140 0.0152291061 0.0101434929 -0.0054783156 0.0738417096 0.0166084477 -0.0137321110 -0.0139952799 -0.0459770466 -0.0154677086 0.0407386522 0.0050777182 -0.0142429794 -0.0541262017 0.0187257471 0.0181250861 -0.0497778914 0.0287966079 0.0193248193 -0.0500018519 0.0080419161 0.0071073021 -0.0658282366 0.0077951461 0.0364242481 -0.0704821685 -0.0931694279 0.1620879216 -0.2844907385 -0.1675755644 -0.0728729014 -0.1031899596 -0.1362712026 0.0324493865 0.0628847927 0.0213961161 -0.0050351213 0.0320823024 -0.0693662199 0.0042822692 -0.0523978265 0.0076154317 -0.0010605203 -0.1679026012 0.0923991644 0.0449361646 -0.0116639263 0.0208795345 0.0356180186 0.1062055392 -0.1033724019 -0.0602689122 -0.1429270620 0.1474054283 0.1904347116 0.0055357449 0.0373684007 -0.0088021136 0.0190719593 -0.0174028550 -0.1375927009 0.0278818722 0.0528597378 0.0523123002 -0.0008602716 -0.0110575173 -0.0341879405 0.0236997547 -0.0277593125 0.0412046617 0.0040321244 -0.0212108864 -0.0159738929 -0.0291960700 -0.0077862805 0.0005300322 -0.0085144434 0.0079362496 -0.0030023578 0.0086868276 -0.0154445472 -0.0064808373 0.0290425812 -0.0035944620 -0.0158924942 -0.0020021158 0.0022445878 0.0138403779 -0.0167187735 -0.0017353268 0.0025260707 0.0160606011 -0.0057251189 -0.0132050603 0.0360754922 -0.0227521136 -0.0112774746 0.0094671773 -0.0027622828 0.0083784987 -0.0228457911 0.0155664761 -0.0007489405 -0.0024246220 -0.0149235381 -0.0001611005 -0.0010124595 0.0194886993 0.0117586500 -0.0170791138 0.0317636315 0.0229096838 -0.0137949181 0.0228005881 0.0089174942 0.0135755650 -0.0239596568 -0.0089553472 -0.0221668149 -0.0085117860 0.0085568804 0.0088952545 0.0107498884 -0.0029670244 0.0161084759 0.0105962423 -0.0054562113 -0.0173626117 -0.0083986716 0.0056126769 -0.0049130255 -0.0192686729 0.0037045217 0.0103445472 -0.0199600280 -0.0028671069 -0.0002883487 0.0216526857 0.0055912757 -0.0157253898 0.0244550916 0.0108220430 0.0144968014 -0.0241860398 -0.0066576582 -0.0159863720 0.0130635831 0.0004204052 -0.0076116983 0.0118671234 0.0616531487 0.0101437797 -0.0042410426 -0.0131658203 0.0000617590 -0.0093297249 -0.0146267958 -0.0107543209 0.0005015112 -0.0092551006 -0.0067009358 0.0035231561 0.0047783798 0.0260900253 0.0107751976 0.0083620739 -0.0252634950 0.0399217434 -0.0121945788 0.0015708541 -0.0107248558 0.0379599747 0.0070049728 -0.0385600186 -0.0369837858 -0.0131065860 -0.0011764371 0.0088798192 -0.0019592320 0.0091884509 0.0067541885 -0.0397578352 0.0256129071 -0.0050808797 -0.0205462114 0.0170175154 0.0012379313 -0.0634437450 0.0681200655 -0.0102734047 -0.0163457696 -0.0236917279 0.0353583769 -0.0075299125 -0.0043976299 -0.0202289693 -0.0370237527 -0.0484932211 0.0801745041 -0.0096120412 -0.0661961960 -0.0780225587 -0.0054007844 -0.0168936202 -0.0286366373 -0.0127856703 -0.0347761491 -0.0414019346 0.0035571208 0.0032380958 0.0006200819 -0.0000260984 0.0216979760 0.0108004256 0.0016959536 0.0072115790 0.0033840820 0.0024215434 0.0106476647 0.0106684386 -0.0073833373 0.0903004632 -0.0295236319 -0.0695417570 -0.0440585626 0.0152945453 0.0107931372 0.0464206260 -0.0554530826 0.0179511557 -0.0798864933 0.0127223232 0.0732561015 0.0474786138 -0.0216074309 -0.0248344528 0.0287295884 0.0316943896 -0.1083975321 -0.2043697983 0.1327765873 0.0047982939 0.0239686851 -0.0179778194 -0.0501683589 -0.2171406604 0.1238039500 0.0344056884 -0.0067216839 0.0390459316 -0.0615651026 -0.0000985468 -0.0598152568 -0.0590630105 -0.0661279288 0.0282741343 -0.0244920541 0.0338099945 0.0059517198 0.0532853509 -0.0005063651 0.0726574130 0.0401564758 0.0691811843 -0.0173106386 -0.0351431213 -0.0348418909 -0.0489255273 -0.0127373852 -0.1419468942 0.0626905707 -0.0090290484 0.0248567029 -0.0106092297 0.0857936599 -0.0976576933 0.1022302707 0.0469642111 0.0320246243 -0.0208491601 -0.0028600392 -0.0089678970 0.0002830835 -0.0020172446 -0.0089746228 0.0015430611 0.0025072539 -0.0048738045 0.0092305691 0.0002528722 -0.0047689136 0.0107216147 0.0433255065 0.0685685102 -0.0392043714 0.0787390179 0.0321903876 -0.0303911018 0.0572125123 0.1431993116 -0.0301365198 -0.0386112383 -0.0261058921 -0.0196037445 0.1506944054 0.1504427038 -0.0085273987 0.0140553349 -0.1407431927 -0.0153223792 0.0036037022 -0.0811693062 0.0011675612 -0.0204666299 -0.0261968214 0.0458328594 -0.0531481575 -0.0788281577 0.0011396554 0.0257196000 0.0449169003 0.0669512164 -0.0296791003 -0.0133416305 -0.0754941036 0.0381606408 0.0214404908 -0.0663964336 -0.0142857062 -0.1039346327 -0.0041420327 -0.0239878790 -0.0266399411 0.0280743983 -0.0820466999 -0.0512040463 0.0796280390 -0.1643522354 0.1029731642 0.0158100075 0.0024825095 0.0968807198 -0.0287386588 0.0740017558 -0.0159883374 0.0469288484 -0.1383486915 0.1326357470 -0.0150728396 -0.0010947095 -0.0400198108 0.0804825437 -0.0128694621 -0.0100155547 0.0015857731 -0.0371760277 -0.0208071092 0.0112009286 -0.0034673826 0.0064888313 0.0108944166 -0.0116076844 0.0019703004 0.0100848086 0.0214245115 -0.0061289442 -0.0075250186 0.0100598197 -0.0046951832 0.0009007914 0.0236952243 -0.0017769013 0.0007675882 0.0395097254 -0.0061323035 -0.0118244180 -0.0125371261 -0.0172941521 0.0325280702 -0.0535811276 -0.0324059011 -0.0165928117 -0.0192089543 -0.0254583588 0.0060177622 0.0114135438 0.0013366651 -0.0023152187 0.0069415166 -0.0131109336 0.0018286478 -0.0113512031 0.0016195924 -0.0000596652 -0.0326816028 0.0165061821 0.0094002902 -0.0017016390 0.0053812599 0.0050182977 0.0172903067 -0.0171570205 -0.0110662439 -0.0232636077 0.0267495681 0.0314224629 0.0047130144 0.0044869597 -0.0032683607 0.0041850753 -0.0001402620 -0.0270264817 0.0057164988 0.0096763712 0.0108114932 -0.0019137594 -0.0018479876 -0.0055895635 0.0089164985 -0.0034328289 0.0108117002 -0.0433294117 0.1700347240 0.1242492452 0.1513274149 -0.0427298869 -0.0839941677 0.0546807982 -0.1203605262 -0.0617834562 -0.0357785663 0.1330532794 0.0732186995 -0.1819798284 -0.0375274164 0.0891330370 0.0545187867 -0.0025695300 -0.0506762495 0.1300878273 0.0681889769 -0.0497801986 -0.1069802205 0.0022681443 0.0936220746 -0.2035171908 0.1171005301 0.1193176934 -0.0890131161 0.0559734397 0.0554080975 0.1323930150 -0.0403419916 -0.0926706923 0.0078476849 0.1244032139 0.0231745287 -0.0195916290 -0.1431981506 -0.0778326432 0.0645828825 -0.2026728162 -0.2031382893 0.0974703607 -0.1507677739 -0.0619916854 -0.0937713398 0.1581549224 0.0598325533 0.1607970870 0.0620447071 -0.0621300888 -0.0545099963 -0.0694732676 0.0161290205 -0.1078159925 -0.0731220952 0.0407698098 0.1207009838 0.0524021598 -0.0377203498 0.0502191790 0.1310723664 -0.0357148938 -0.0704641566 0.1457602171 0.0037664337 -0.0026233368 -0.1467453910 -0.0464414325 0.1068793709 -0.1786077081 -0.0803058218 -0.1074301615 0.1602177706 0.0321074070 -0.0298557175 -0.0374097901 -0.0008658245 -0.0341353727 -0.0775789723 -0.0237203922 0.0004220041 -0.0004023011 -0.0008564959 0.0018341523 0.0332439592 0.0509655971 0.0274073641 -0.0027864906 0.0494194221 0.0246409693 -0.0097522177 -0.0210322407 -0.0461614899 -0.0207643768 -0.0082791521 0.0374082793 -0.0590827889 0.0227137663 -0.0019309806 0.0188174747 -0.0657884032 -0.0126924402 0.0565187567 0.0548147468 0.0114685360 -0.0043732046 -0.0242697949 0.0070092191 -0.0306502292 -0.0233771680 0.0501256241 -0.0358360299 0.0065829787 0.0315817205 -0.0238830208 -0.0012843584 0.1052004389 -0.1061117375 0.0211816848 0.0385251181 0.0494224663 -0.0540971262 0.0104480038 0.0095413565 0.0088442893 0.0399922564 0.0843158692 -0.1327367142 0.0173940095 0.1043902990 0.1227874644 0.0106133814 0.0158201170 0.0353195427 0.0239198755 0.0534494376 0.0642299839 0.0031972365 -0.0240051169 -0.0159708654 0.0106761904 -0.0360922895 -0.0162206438 0.0124066104 -0.0371211374 -0.0280157734 0.0002159490 0.0019706015 0.0041773882 -0.0046184248 0.0226159212 -0.0046092447 -0.0186015401 -0.0083134796 0.0013380344 0.0003955183 0.0057768160 -0.0096275110 0.0064073343 -0.0180801134 -0.0003243306 0.0180752096 0.0087991654 -0.0016891510 -0.0088210938 0.0092371224 0.0085372248 -0.0243437354 -0.0403572176 0.0228180986 0.0009874534 0.0036961425 -0.0027095233 -0.0073424135 -0.0426001688 0.0188947756 0.0095525383 -0.0001237678 0.0104129518 -0.0080914078 0.0029891800 -0.0054133075 -0.0041280983 -0.0104052203 0.0034615604 -0.0031637929 0.0054929497 -0.0007127104 0.0058237433 -0.0009192172 0.0070507985 0.0020215206 0.0085641284 -0.0011777606 -0.0051962271 -0.0023793197 -0.0036691958 0.0024060297 -0.0250436927 0.0073345229 -0.0006972821 0.0036480728 -0.0015353957 0.0154096127 -0.0180680044 0.0120881143 0.0048568510 0.0020754552 0.0001497909 0.0004715759 -0.0019973152 -0.0007464253 -0.0007003877 -0.0012809847 -0.0009738460 0.0004599153 -0.0009936065 0.0013149357 0.0003062602 -0.0009879959 0.0011985739 0.0080073076 0.0126354553 -0.0068426520 0.0134708537 0.0059361535 -0.0052695982 0.0110845039 0.0257867211 -0.0057538118 -0.0058415294 -0.0044271389 -0.0033653088 0.0276489888 0.0268105389 -0.0026723269 0.0040052513 -0.0260042507 -0.0027792942 -0.0002339243 -0.0134905768 0.0004530917 -0.0044819556 -0.0044453404 0.0079865225 -0.0106351120 -0.0134399949 -0.0005905074 0.0027464953 0.0066256958 0.0109232298 -0.0053933812 -0.0025506742 -0.0141221995 0.0077841296 0.0041806453 -0.0122831536 -0.0020739148 -0.0195153874 -0.0014396218 -0.0052322677 -0.0049313005 0.0052213522 -0.0159227343 -0.0090944216 0.0149775692 -0.0336018852 0.0204493676 0.0041093912 0.0002452353 0.0180211475 -0.0042826298 0.0147553302 -0.0034680428 0.0088314617 -0.0277627175 0.0254555437 -0.0008646512 0.0007184221 -0.0069272194 0.0153600184 0.0440324852 0.0366957424 -0.0033170389 0.1210219115 0.0796861210 -0.0406942235 0.0166184524 -0.0100473742 -0.0350094987 0.0328993563 -0.0107942963 -0.0358554438 -0.0630063817 0.0206345616 0.0209925379 -0.0205086410 0.0052007497 -0.0144567736 -0.0647486461 -0.0038066983 -0.0140568426 -0.1294325036 0.0186320425 0.0389098942 -0.0114094786 -0.0547492958 -0.0869265771 0.0497345607 0.0141241598 0.2018238073 0.0031172458 -0.0460307328 0.0361157767 -0.0184574789 0.0717378657 0.1961817802 0.0130175874 -0.0110745774 0.0213508903 0.0009616249 -0.0157931238 0.0090608676 0.0736517585 -0.0542741061 -0.1411817823 0.0506477287 0.0094509047 0.0281816910 -0.0360265203 0.0216554750 0.0787670283 0.2169446599 -0.0273322230 0.0304453570 0.0032454409 0.0813399186 0.0840872110 0.0657565755 -0.0768909253 -0.0948857260 0.0221248454 0.0197184766 0.0194210640 0.0111294589 -0.0019595131 -0.0201777872 0.0027406555 -0.0044843255 0.0242502909 -0.0105770099 0.0066476749 -0.0104006221 -0.0022392605 -0.0042174038 -0.0052779330 0.0006063965 -0.0038777594 -0.0031429363 0.0016640373 0.0019781332 0.0020554315 -0.0002707657 -0.0030593251 0.0000244974 0.0018745912 0.0006636649 0.0015218447 0.0020955758 0.0033368461 -0.0018563935 -0.0015743329 -0.0002601711 -0.0013660352 0.0012883331 -0.0010082536 0.0039907273 -0.0035414164 0.0029650519 0.0033992719 -0.0003675857 0.0039616164 -0.0059052085 0.0004418664 0.0005544651 0.0031039175 -0.0015849787 -0.0011546367 -0.0007646782 0.0004577057 -0.0031023479 0.0021147518 0.0005483522 -0.0009277239 -0.0003052689 -0.0002095203 0.0008680088 0.0011498781 0.0016014234 0.0000129182 0.0002030275 -0.0001617591 -0.0003152209 0.0006372741 -0.0009573409 -0.0000438133 -0.0004674217 0.0009939395 0.0001840325 -0.0013123291 0.0012019709 0.0003772329 0.0010276692 0.0002510356 0.0005810228 0.0015819012 -0.0008203769 -0.0002201346 -0.0012379042 0.0005719735 -0.0013166697 -0.0024477687 -0.0003723330 0.0003863091 0.0022575591 -0.0061733549 0.0018347015 -0.0002299922 -0.0022489024 -0.0054669905 0.0335697117 0.0027292935 0.0079764803 0.0009970944 -0.0003635036 -0.0004913705 -0.0013729808 -0.0022930593 0.0012015073 -0.0031024465 0.0000792720 0.0005538946 0.0011067284 0.0021912753 0.0013458595 0.0023831612 -0.0015916942 0.0044471921 0.0001128348 -0.0000260721 -0.0005836818 0.0015597787 0.0009228400 -0.0043443878 -0.0051672922 -0.0016814518 -0.0007187913 0.0014661892 -0.0000804924 0.0006853067 0.0004994998 -0.0100366841 0.0032699430 -0.0013091841 0.0015292339 -0.0039709101 0.0014644889 -0.0065067168 0.0071329435 -0.0003127827 -0.0015440836 -0.0007671460 0.0096761536 -0.0026488995 0.0064643748 -0.0073039976 -0.0094210195 0.0009708034 0.0027336834 -0.0017824771 -0.0074767934 -0.0063882076 -0.0005225312 -0.0023577302 -0.0012565272 -0.0014169804 -0.0088113637 -0.0078508318 0.0007275389 -0.0004183345 -0.0006984436 0.0002796806 0.0029482507 0.0012029429 0.0004318235 0.0007107428 0.0000359817 0.0083340311 -0.0012222199 -0.0039973937 0.0281499882 -0.0153167574 0.0042583994 0.0382831297 0.0033720338 0.0138688241 -0.0075433104 0.0039864182 0.0025410791 -0.0376716879 0.0239692912 0.0103574300 -0.0394766168 0.0110311138 -0.0082686011 0.0181752247 -0.0233720271 0.0094908318 0.0473267729 -0.0035926862 0.0078793037 -0.0003153663 0.0004894224 0.0062236762 -0.0393365720 0.0243949879 0.0091637039 -0.0472951161 0.0296710712 -0.0077126354 0.0228015140 0.0152169973 0.0043055976 0.0318831351 0.0138862946 -0.0093054052 -0.0078014450 0.0008261762 -0.0054236507 -0.0291635792 -0.0178641061 -0.0224027392 -0.0297943494 -0.0201916987 -0.0029890422 0.0272174214 0.0058602676 0.0070591130 0.0449016976 0.0065147780 0.0039669866 0.0026572552 -0.0061691588 -0.0019216348 -0.0272320592 -0.0279175958 -0.0190440455 -0.0291761130 -0.0450477360 -0.0109043943 0.0028244254 0.0052131182 0.0069192981 0.0103489355 -0.0007506745 0.0001411418 0.0035386683 -0.0001998164 -0.0075070297 0.0077652041 0.0054934528 0.0004205244 -0.0360923663 -0.0958712954 -0.0299226121 -0.0977202018 -0.0006347560 0.0085632335 0.0085118250 -0.1135909127 0.0837445659 0.0947142760 -0.0072732377 -0.0839449925 -0.0583342985 -0.0343050675 0.2765501762 0.0756445618 0.0844579297 -0.0192571871 -0.0740858233 0.1111329706 -0.0945920110 -0.0047080074 0.0624460425 0.0181425355 -0.0087973353 0.1523054749 0.0162038302 -0.0626854681 0.0035749112 0.2900054046 -0.0982212458 -0.0096921861 -0.1239682354 -0.0436646301 0.1266096157 -0.0635568896 -0.1281916837 -0.1766592585 0.0369127090 -0.0061878498 -0.0902356814 0.0085007933 0.0131662477 -0.2017951772 0.0412222785 0.0908795431 -0.0047942205 -0.2722111047 0.0540208351 0.1816738681 -0.1171121400 0.0430498387 0.0170131862 0.1534359964 0.0751006234 0.0742538177 -0.3172395771 0.0488932964 -0.1259450075 0.1157847241 -0.0014482920 -0.0010770350 0.0000783905 -0.0032398548 -0.0022957032 0.0010722451 -0.0009770567 -0.0004159208 0.0012481015 -0.0003675641 0.0003722365 0.0008957673 0.0017425273 -0.0003690638 -0.0009665741 -0.0007272741 -0.0002039698 0.0008738300 0.0034326416 -0.0015726870 -0.0010842167 0.0030190399 -0.0014802301 0.0001889299 0.0174814346 -0.1078712628 -0.1941596690 -0.0864375093 0.2096965178 0.3108399158 -0.0260447580 0.0886980573 0.0124404466 0.0886059773 0.0238326460 0.1329687518 0.0407954151 -0.0316521994 0.0676539371 -0.0921138556 -0.1043577257 0.0099796564 -0.0407890672 -0.0866975971 -0.0182034268 0.0609423179 -0.0482205080 0.1045457510 -0.0900967096 -0.0722609178 0.1446421214 0.3025538264 -0.0879834715 0.1371000451 0.0835765187 -0.0026481540 -0.1372867483 -0.0745449291 0.1075370988 0.0695524151 -0.0443013091 -0.0203198697 -0.0146766239 -0.0361263573 0.0001542850 0.0327454099 0.0117944948 0.0081294298 -0.0237083406 0.0029030395 -0.0012318943 0.0034860506 0.0027008117 0.0060584786 0.0034830892 -0.0009067798 0.0039433522 0.0029868554 -0.0026935225 -0.0014174291 -0.0026467305 -0.0005139932 0.0032952729 0.0008648242 -0.0011903037 -0.0020729097 -0.0009254200 -0.0020040264 -0.0037240587 0.0011084657 0.0009943482 0.0002075684 0.0018990664 -0.0019282609 0.0010543791 -0.0029561054 0.0038636142 -0.0041999720 -0.0031979619 0.0005341928 -0.0046919626 0.0051378080 0.0014155862 -0.0005164938 -0.0012847865 0.0006690783 0.0009075059 -0.0009923074 -0.0004809268 0.0021304522 -0.0041563683 -0.0001936305 0.0002203699 0.0001372467 0.0001496421 -0.0002942016 0.0001365290 -0.0006877921 -0.0000931918 0.0005200766 0.0001746093 -0.0000008484 0.0000932396 0.0000020058 -0.0000148390 -0.0004195425 -0.0009057671 0.0000800100 0.0001385645 -0.0006985523 -0.0001524935 0.0002141216 0.0004524615 0.0002810830 0.0006118423 0.0008769502 -0.0004454280 -0.0001546091 -0.0010079920 0.0008423764 -0.0000414970 0.0007262879 -0.0001382489 0.0005543204 0.0054452405 -0.0018221891 0.0014928617 -0.0016645255 0.0125645296 -0.0612930883 -0.0301499171 -0.0354936826 -0.0135059337 0.0004224693 0.0007125957 0.0009106588 0.0019256253 -0.0009077928 0.0027942514 -0.0003584973 -0.0004699937 -0.0009696419 -0.0024475227 0.0006517095 -0.0014574131 0.0030029086 -0.0053174116 0.0004613071 0.0012178628 -0.0009761737 -0.0013405943 -0.0018253486 0.0017721992 0.0022834670 0.0013935054 0.0005034955 -0.0012214939 0.0000650304 -0.0004765228 -0.0003796309 0.0042048895 0.0017383255 -0.0027748716 0.0025473899 -0.0017080787 -0.0028839940 0.0094249197 -0.0141644261 -0.0030383600 -0.0002589059 -0.0023311528 -0.0062673133 0.0020824897 -0.0014881214 0.0064139015 0.0064371424 0.0013452410 -0.0044001912 0.0025239849 0.0068380316 0.0058334212 0.0015757257 -0.0039071617 -0.0045670631 0.0025895190 0.0042118586 0.0043822544 -0.0005401203 0.0003342087 0.0005090711 -0.0002083100 -0.0023520880 -0.0009403871 -0.0002934983 -0.0005349074 -0.0000751896 0.0312013601 -0.0221113225 0.0048228901 0.0528699426 -0.0027201015 0.0225428787 0.0628434822 0.0053024887 0.0479132938 -0.0344132178 0.0265232356 -0.0041751829 -0.0867718716 0.0245371116 0.0135068850 -0.0786188367 0.0219639869 -0.0393302516 0.0321868057 0.0124929933 -0.0001725187 0.0950583264 -0.0262598482 0.0300379891 0.0022868794 0.0134735392 0.0039461037 -0.0748650606 0.0168219354 0.0246984839 -0.1037241461 0.0958282071 -0.0437627090 0.0272276046 0.0940133819 0.0500324931 0.0923541448 -0.0001900855 0.0523200656 0.0191877492 0.0826395154 0.0019657853 0.0047306878 -0.0587393148 -0.0544384182 -0.0374090694 0.0217302958 -0.0664345288 0.1087314320 0.1140140841 0.0363839853 0.1341412840 -0.1185337365 0.0715572050 0.0045188068 0.0183458398 -0.0213280371 0.0061557101 -0.2141348914 -0.0033332740 0.0050863178 -0.0050425518 -0.0277211257 0.0176316077 0.0062097350 0.0206317170 0.0284719211 -0.0123797938 -0.0049363161 -0.0402567454 -0.0217282985 -0.0041968506 0.0026578846 -0.0215170444 -0.0298684539 0.0045280430 0.0908824562 -0.0822821465 0.1143502558 0.0152552241 -0.0305049923 -0.0202455087 0.1358862880 -0.0486096464 -0.1366662278 -0.0434320134 0.0241665479 0.1314114984 0.1535624092 0.0064024560 -0.1017773205 -0.0632309172 0.0992332673 0.0747427172 -0.1292915751 0.0292530030 0.0380734846 -0.0699404758 0.0216271956 0.0185876888 -0.1002867845 0.1049673860 0.1574222074 0.1086758807 0.0251500920 -0.0052616842 0.0325647031 -0.0421497100 0.0194976974 0.0643794280 -0.0259730209 0.0175064346 0.0198277533 -0.0054599627 -0.0136530318 -0.0261694048 0.0093095692 0.0409069999 0.0461636626 0.0550919024 -0.0427031653 -0.0198495956 0.0411787701 -0.0125991232 0.0447024010 -0.0380272941 0.0055604822 -0.0300174313 0.0098435241 -0.0941651961 0.0422092791 -0.0765681195 -0.0301202007 -0.0567307906 0.0215261972 0.0023887331 0.0019612903 -0.0002833154 0.0041677984 0.0027817132 -0.0009420198 0.0018112015 0.0009572843 -0.0011448584 0.0021571526 0.0008394314 -0.0010499585 -0.0019385999 0.0005246925 0.0006642134 0.0000531227 -0.0035952026 -0.0022504938 -0.0074518602 0.0072626155 0.0045999874 0.0009987939 0.0021637374 -0.0024125364 0.0062131403 -0.0059385652 -0.0030824967 -0.0024026262 0.0066358546 0.0040198565 0.0007201188 0.0044806320 -0.0012759537 0.0026331383 -0.0056700210 0.0003032977 0.0041381701 -0.0045513163 0.0029199614 -0.0048210597 0.0041368312 0.0027503695 -0.0015373280 -0.0010200656 0.0012556730 -0.0026613461 0.0117514602 -0.0088841857 0.0057320699 -0.0031977832 -0.0146144895 -0.0161917728 0.0179797886 -0.0043824458 -0.0069120597 0.0030358074 0.0088611706 -0.0008208022 0.0069628819 0.0036114135 0.0053467729 -0.0067119326 -0.0033706616 0.0015657446 0.0002621828 -0.0026562825 -0.0039156043 -0.0008672191 0.0037058581 0.3836064162 -0.2112380753 0.4260867608 -0.0206298299 0.0035914506 -0.0074681192 0.0113268869 -0.0034528002 0.0299695160 -0.0022820059 -0.0066698703 -0.0069919468 0.0066087351 0.0054778435 -0.0198130966 -0.0152550166 0.0054598068 -0.0154266910 0.0043929370 -0.0137482482 0.0259270993 0.0268458323 -0.0102658154 0.0203416074 -0.0491856758 0.0218754809 -0.1196284927 -0.0400643461 0.0201472125 -0.0805719092 -0.0138156402 0.0028283783 0.0012661488 -0.0504244661 0.0264688902 -0.0780826195 0.0228595279 -0.0032693237 0.0399457873 -0.0639624230 0.0796476144 -0.1092539964 0.0185892620 -0.0021204051 0.0645576618 -0.0236936067 0.0010700386 -0.0787470648 -0.0462441426 0.0044730294 -0.0753819971 -0.0229054152 0.0118710561 -0.0511430557 0.0525928074 -0.0059444901 0.0975656466 0.0379665613 -0.0180192178 0.1104176827 -0.1465002338 0.0374894240 -0.3239312687 -0.1712311198 0.0509116099 -0.3737850991 -0.0037197432 0.0120914537 -0.0140260221 0.0029706116 0.0163677196 0.0278557187 -0.1510753458 0.0406980555 -0.3752477426 -0.0004343585 0.0110066760 -0.0068888670 -0.0038255720 0.0152558082 -0.0009052499 0.0005171238 -0.0034014975 0.0005685748 -0.0063958589 0.0149118255 -0.0017103993 0.0514041896 -0.0648009155 0.1322842974 -0.0043319259 0.0115890898 -0.0327500476 -0.0036193770 -0.0053680418 -0.0014035768 -0.0047756136 -0.0073164626 0.0006330464 -0.0068623302 0.0055163092 -0.0085112373 0.0010159822 0.0047972362 0.0105869795 -0.0079790151 0.0135837043 -0.0342922059 0.0007734396 -0.0079615263 -0.0090399232 0.0290452688 -0.0054725964 0.0058581701 -0.0252174922 0.0461012112 -0.0034408915 0.0311166888 -0.0128072302 0.0131772636 0.0301826321 0.0287581320 -0.0237793096 0.0087640064 -0.0404386172 0.0069293250 0.0068415271 0.0160171671 -0.0200800115 0.0006074967 0.0004204583 -0.0074732834 -0.0030855333 0.0139992507 0.0067471025 -0.0027394117 0.0262092779 0.0195646662 -0.0009227057 0.0039037639 0.0059820621 0.0074039399 -0.0173742690 0.0053734724 0.0126233242 -0.0350509210 -0.0200462137 0.0049880676 -0.0053470711 0.0020309249 0.0020528843 0.0054331288 0.0029244945 0.0002000472 0.0018199817 0.0060697888 -0.0058710562 0.0050800632 -0.0013366853 -0.0059471547 -0.0031268338 -0.0008706228 -0.0043079671 -0.0001111850 -0.0068795553 -0.0030969318 0.0099818286 -0.0037275374 0.0040270535 -0.0063574584 0.0057885893 -0.0005809250 0.0017007656 -0.0001516750 -0.0000812133 -0.0044530871 0.0024634638 -0.0072531911 0.0105584924 -0.0082954727 -0.0035901703 0.0007730149 0.0003398422 -0.0023943827 -0.0038113237 0.0020248919 0.0010788449 0.0005225002 0.0002623276 0.0044884263 -0.0007568486 0.0033553767 0.0020708610 0.0036349062 0.0006397230 -0.0056743696 0.0063060154 -0.0013855743 -0.0054405012 -0.0022437286 -0.0010956310 -0.0023654586 0.0047523602 -0.0028436185 0.0019363165 0.0050730652 0.0016722756 -0.0015261486 0.0135288289 -0.0003936134 0.0037879241 -0.0001041141 0.0023829246 0.0031026209 -0.0030414459 -0.0020176906 0.0003918381 -0.0013327264 0.0013211844 -0.0003218622 -0.0017754366 0.0009200098 -0.0025077046 0.0017999863 0.0003851656 -0.0007152722 0.0012677027 -0.0010301175 -0.0030069485 -0.0032380336 0.0009203562 -0.0017494593 -0.0012226518 0.0019534697 -0.0019522707 -0.0045273190 -0.0019505563 -0.0040570426 0.0024439195 0.0000113664 -0.0004037322 0.0041964562 -0.0005148405 0.0015681990 -0.0009624640 -0.0007739135 -0.0032068250 0.0043307770 -0.0005335504 0.0002023642 -0.0030530240 -0.0024133704 -0.0012894266 -0.0025694047 -0.0020320778 0.0002510424 0.0029492541 -0.0009286766 -0.0050458904 -0.0053643000 0.0004895487 -0.0000379135 -0.0027687626 -0.0017525548 -0.0063898434 -0.0048656019 0.0013423313 0.0008613668 0.0018685478 -0.0107082207 0.0038016215 0.0025456070 -0.0000469654 0.0018990464 0.0013516612 0.0065596861 0.0053473839 -0.0004105019 -0.0050185803 0.0023852216 0.0022690399 0.0065323224 0.0047852347 0.0050513257 0.0040825866 0.0181912584 0.0189328317 -0.0055266745 0.0014717195 0.0025031588 -0.0074422745 0.0030434041 -0.0062903550 -0.0040426111 -0.0097682312 0.0088245135 0.0055172435 0.0003971045 0.0131254132 -0.0009943460 -0.0083221260 -0.0048292812 -0.0097917499 -0.0201870168 0.0033565562 0.0164449282 0.0378620762 -0.0227987376 -0.0137800858 -0.0007503342 0.0354486978 0.0041228379 0.0103048973 0.0296835591 -0.0101728747 0.0092342856 -0.0232295879 -0.0100402072 0.0113669392 -0.0170528916 0.0176951983 -0.0128749354 0.0216346595 0.0143857727 -0.0047775381 0.0046664793 0.0073966393 -0.0097701391 0.0364363710 -0.0276926288 0.0287139310 -0.0084354260 -0.0500107796 -0.0643435889 0.0613843824 -0.0098476867 -0.0198791905 0.0046945701 0.0284155599 -0.0113190751 0.0281448561 0.0250668169 0.0135098036 -0.0323548309 -0.0148183347 0.0037415896 0.0098080723 -0.0027802710 -0.0079561353 0.0063417525 0.0031858271 -0.0236892978 0.0133658206 -0.0286889381 0.0000365155 0.0016783626 -0.0019699768 -0.0003226255 0.0006702942 -0.0008671691 -0.0016479697 0.0005309700 -0.0011215068 -0.0002759691 0.0002407540 0.0022095355 0.0009383757 -0.0003712389 0.0006805360 -0.0012679675 -0.0000157615 -0.0009062341 -0.0015794088 0.0005426117 -0.0008326223 -0.0005224864 0.0015692919 0.0023165734 0.0021270735 -0.0009840560 0.0015047046 0.0013277735 -0.0023211815 0.0026587423 0.0052767064 -0.0020284219 0.0049455025 -0.0019696433 0.0006297809 -0.0042373692 0.0003267680 -0.0014252528 -0.0035513661 -0.0049038708 0.0018191780 -0.0104580905 0.0039128232 -0.0016287566 0.0087789991 0.0035661390 -0.0018083613 0.0103730108 0.0029229121 -0.0001932330 0.0060014665 -0.0059499703 0.0027928355 -0.0143167932 -0.0069044118 0.0020484191 -0.0153356738 0.0220592061 -0.0083272856 0.0531524317 0.0271808881 -0.0079548226 0.0583525030 0.0051073961 -0.0001925389 0.0113662735 0.0024416010 -0.0005013941 0.0071581838 0.0249403810 -0.0087811473 0.0596102560 0.0017193960 -0.0015266060 -0.0007522520 0.0027474590 -0.0000047346 0.0106716341 0.0038639304 -0.0030742142 0.0028725855 -0.0011613812 0.0024461584 -0.0060288253 -0.0014305566 -0.0084616267 0.0119574539 0.0105699767 -0.0128386181 -0.0159052857 0.0311571936 -0.0685428812 -0.0473234608 -0.1066416869 0.0515993440 -0.0495591669 -0.0100790935 -0.0672828121 0.0250268797 0.0862858316 0.1109455466 0.0933550174 -0.0133939134 -0.0018078437 0.0005039121 -0.0015633550 0.0006952645 0.0009692937 0.1284089221 0.0273729353 0.0180789601 -0.2631400296 0.4140367498 -0.0309054940 0.0270432477 0.0942999575 0.0378019745 -0.0154899969 -0.0469549552 0.2615110147 -0.0199378352 0.0244397517 0.1544492990 0.0218169221 0.1401349468 -0.1517641260 -0.1175249240 -0.0996958479 -0.0146412711 -0.0984882903 0.4271236177 0.4632480046 -0.1446816493 0.0073618481 0.0038364183 0.0045615407 -0.0033950717 -0.0028809325 0.0019548988 0.0141863976 0.0082292671 0.0044880357 -0.0054249932 -0.0045485360 0.0336096699 -0.0275901491 0.0096103660 0.0070732039 0.0317997869 0.0256504213 -0.0009559170 0.0139931272 0.0348032261 -0.0396200929 0.0238854167 -0.0048535731 -0.0270851730 -0.0227110581 -0.0176145761 -0.0201526860 -0.0094302052 -0.0372077517 -0.0209965379 0.0647233591 -0.0189155217 0.0313084121 -0.0109450631 0.0136931177 -0.0038639029 0.0159760576 -0.0069616116 0.0137400660 -0.0233140189 -0.0031905551 -0.0440538157 0.0485287294 -0.0375460682 -0.0111537457 -0.0047935186 -0.0041296778 -0.0128892178 -0.0091872917 -0.0009309239 -0.0016360365 -0.0023030344 -0.0011891892 0.0093701970 0.0043016498 0.0121208262 0.0053117320 0.0096052501 0.0076719648 -0.0199086313 -0.0057579589 -0.0029984251 -0.0171171466 -0.0065839843 -0.0053001674 -0.0034734553 0.0043012140 -0.0012559091 0.0167837802 0.0099618447 0.0096204333 0.0034397153 0.0158212922 0.0074353745 0.0235750702 -0.0011483306 0.0154558578 0.0174742393 -0.0183737706 -0.0133997432 0.0031148651 0.0001940452 0.0022515757 -0.0012828243 -0.0004597958 0.0036065087 -0.0131392317 0.0103732848 0.0058841325 -0.0015915086 0.0059491603 -0.0071270402 -0.0209741298 -0.0182171045 0.0041140166 -0.0154875305 -0.0058838968 0.0141626945 -0.0159618864 -0.0280071014 -0.0181231562 -0.0310385582 0.0180069232 -0.0001898344 0.0037751558 0.0185846664 0.0006863803 0.0126989991 -0.0079439809 -0.0059616365 -0.0121414970 0.0184860348 -0.0014589541 0.0093931874 -0.0142257648 -0.0247647864 -0.0055863199 -0.0098178867 -0.0053279255 -0.0008684146 0.0077582704 -0.0046993810 -0.0167622964 -0.0229336568 0.0019526495 0.0004616742 -0.0082794635 -0.0050233509 -0.0283622127 -0.0203390419 0.0044452693 -0.0040631441 0.0121146865 -0.0324635326 0.0116852223 0.0107639604 -0.0038016665 0.0067579360 0.0050469339 0.0189332158 0.0128302634 0.0041562084 -0.0159683615 0.0014561814 0.0066963983 0.0221007233 0.0011247943 0.0024693391 -0.0001805527 -0.0051970072 -0.0041673879 0.0053649469 0.0016877946 0.0025131302 0.0035832310 0.0064615418 0.0090953152 0.0036859989 0.0039324491 -0.0015589654 -0.0013774987 -0.0033703955 -0.0032114335 0.0031524908 0.0105909159 -0.0044642471 0.0018713800 0.0028571206 -0.0017138984 -0.0012085122 -0.0965526324 0.0585911462 0.0407176422 -0.0041657951 -0.0933992544 -0.0172254234 -0.0281561535 -0.0763713943 0.0256494582 -0.0221487372 0.0586550447 0.0277149725 -0.0272774360 0.0413650348 -0.0462442379 0.0329320121 -0.0577414362 -0.0388131960 0.0091520630 -0.0124117713 -0.0173239294 0.0270032119 -0.0984591915 0.0772537918 -0.0748318658 0.0230387096 0.1364485129 0.1751673997 -0.1647973695 0.0309775090 0.0552470078 -0.0121068616 -0.0796927425 0.0287097445 -0.0765477318 -0.0701889505 -0.0373320403 0.0877266915 0.0415742598 -0.0172479646 -0.0260085922 0.0040237094 0.0240589883 -0.0174985784 -0.0068669839 0.0214058460 -0.0103090597 0.0259335044 0.0023921361 -0.0053018602 0.0075590873 -0.0009347655 -0.0009892657 -0.0013494946 0.0040016986 -0.0022481516 0.0037372523 0.0013273545 -0.0007803076 -0.0040326075 -0.0007150967 -0.0003095525 0.0000661056 -0.0009546286 0.0002165014 -0.0011111580 0.0005819942 -0.0027256562 -0.0000376118 0.0094049154 -0.0076521420 0.0083626850 0.0033305738 -0.0025266403 0.0072589340 -0.0028258484 0.0022538082 -0.0036041362 -0.0020367464 0.0032099542 -0.0058367967 0.0018904382 0.0005239209 0.0014737716 -0.0046899006 0.0069777264 -0.0126655561 0.0025664219 -0.0007746784 0.0090688431 -0.0020333923 -0.0003438975 -0.0087374692 -0.0060095219 0.0005135008 -0.0080489189 -0.0024499731 0.0013997235 -0.0062484954 0.0073979611 -0.0010500566 0.0132709899 0.0045653053 -0.0019673842 0.0149576433 -0.0228651145 0.0062114803 -0.0490248871 -0.0255017857 0.0104462078 -0.0566056082 -0.0066851107 0.0037419809 -0.0123402451 -0.0049799657 0.0050153210 -0.0077748721 -0.0223276960 0.0068701684 -0.0586513474 -0.0058061545 0.0054003829 0.0033664615 -0.0088459194 -0.0003633194 -0.0411014501 -0.0093481139 0.0129476750 -0.0068916877 -0.0016125234 0.0025520807 -0.0069310732 0.0014521564 -0.0135762309 0.0214450723 0.0080528567 -0.0073879681 -0.0142794253 0.0244694460 -0.0520002627 -0.0301048151 -0.0824788149 0.0451952683 -0.0372230954 -0.0011544187 -0.0532076152 0.0135374001 0.0657095574 0.0830457817 0.0617151820 -0.0138385046 -0.0007836931 -0.0018992193 -0.0012751357 0.0007989155 0.0003711587 0.0787789917 0.0352288983 0.0044695683 -0.1919062618 0.3004359507 -0.0264365887 0.0202874703 0.0653883944 0.0202837868 -0.0137953066 -0.0409436787 0.2183206623 -0.0159976430 0.0372257983 0.0993303102 -0.0012659062 0.1209442116 -0.1277779279 -0.0924861159 -0.0744879029 0.0048712273 -0.0728712895 0.3166366555 0.3596076191 -0.1074654683 -0.0282021743 -0.0200887220 0.0040978237 -0.0024549017 -0.0024188431 0.0029939401 0.0131664409 0.0091469796 0.0059588075 -0.0076322759 -0.0062518169 -0.0797780295 0.0775357793 -0.0315243121 -0.0184482603 -0.0804290272 -0.0630773504 0.0034233455 -0.0311678577 -0.0902402939 0.1008984827 -0.0534261502 0.0067216574 0.0708200298 0.0601053911 0.0384422594 0.0515209089 0.0219112047 0.0936083908 0.0456462635 -0.1757858650 0.0607008095 -0.0793890727 0.0278583567 -0.0338248481 0.0081079780 -0.0438310974 0.0199391732 -0.0386836652 0.0430851919 0.0179523050 0.0985434307 -0.1482746718 0.1173079017 0.0312955353 0.0137066325 0.0086621983 0.0356467095 0.0277372433 -0.0017880440 0.0029222691 0.0028662849 0.0023259600 -0.0282130527 -0.0096810182 -0.0324774117 -0.0162820474 -0.0274898156 -0.0169857141 0.0602260697 -0.0029618297 0.0121962634 0.0511153437 0.0150940729 0.0130997659 0.0098257825 -0.0165435685 0.0059197205 -0.0425755324 -0.0264606245 -0.0257035331 -0.0071789515 -0.0555484114 -0.0151472693 -0.0586615704 0.0042797671 -0.0399482192 -0.0434769860 0.0479130449 0.0320872988 -0.0067629040 0.0013492772 -0.0073636675 0.0032887172 0.0037874923 -0.0089887040 0.0322326529 -0.0254135310 -0.0168106213 0.0047314206 -0.0134428864 0.0183942789 0.0531292604 0.0469192116 -0.0095148259 0.0383340674 0.0133706366 -0.0373530342 0.0432857725 0.0739567431 0.0526326958 0.0779962206 -0.0454352489 0.0019738277 -0.0096545830 -0.0467436809 -0.0038974040 -0.0308585344 0.0196124858 0.0163320450 0.0291269192 -0.0455961726 0.0037355467 -0.0216029702 0.0374373215 0.0696403479 0.0131271522 0.0257162701 0.0139633253 0.0025710185 -0.0200466663 0.0098747211 0.0450674238 0.0577062114 -0.0046005919 -0.0009835866 0.0222830227 0.0150163774 0.0734019633 0.0517260827 -0.0101414469 0.0061432276 -0.0287034643 0.0895704167 -0.0322893198 -0.0247088051 0.0063679773 -0.0169965487 -0.0139076467 -0.0516816169 -0.0410069782 -0.0049129653 0.0405639837 -0.0083828211 -0.0214322863 -0.0579976986 0.0001669646 0.0014105833 0.0003476376 -0.0059077499 -0.0043279802 0.0054340288 0.0013526838 0.0027331498 0.0048716280 0.0077961661 0.0076466890 0.0033355230 0.0039920973 -0.0009110559 -0.0015360536 -0.0026606047 -0.0014908130 0.0026231670 0.0088002493 -0.0035981188 0.0008107122 0.0066192037 -0.0023999326 -0.0001779593 -0.0239291617 0.0075831183 -0.0232450135 -0.0015469104 0.0039718044 0.0289570829 -0.0072380431 -0.0043927176 0.0084004729 -0.0020962055 0.0099619206 0.0096447120 -0.0123522288 0.0130011653 0.0102798994 -0.0306805324 -0.0049667820 0.0157522527 0.0177139470 -0.0281471543 -0.0167537957 -0.0129278642 0.0524321519 -0.0503291854 -0.0181447546 -0.0373844581 -0.0666440276 -0.0341136214 0.0622709547 -0.0418475522 -0.0332979089 0.0316907186 0.0495049699 0.0007786612 -0.0169322002 -0.0095440366 0.0256367728 -0.0220787736 -0.0055647263 0.0130404379 0.0102857658 -0.0080882691 -0.0047357796 0.0043308614 0.0105510517 0.0113497032 -0.0062413095 0.0117410477 -0.0039362508 -0.0013642373 -0.0047208407 0.0011692814 -0.0017543519 0.0003599058 -0.0009339201 0.0004993548 -0.0008448925 0.0006365086 -0.0009294172 0.0000999682 0.0004308035 0.0010719791 0.0000842942 0.0002031980 0.0002107755 0.0010084640 0.0001621106 -0.0008815999 0.0006606240 -0.0044783203 0.0036643848 -0.0077210341 -0.0027494540 0.0026579755 -0.0025828042 -0.0001495383 -0.0005587412 0.0000187624 -0.0002047162 0.0005777811 -0.0018260347 0.0012565692 -0.0004852654 0.0005597576 -0.0008322351 0.0016898787 -0.0052418435 -0.0010934513 -0.0000541462 -0.0004456395 0.0006877239 -0.0002206931 -0.0002308233 -0.0012550176 -0.0010260473 0.0005602113 -0.0006254821 0.0004207705 -0.0005477142 0.0005399833 0.0009302260 -0.0000513445 -0.0001478142 0.0000028690 -0.0004153335 -0.0004769768 -0.0012218355 0.0037431704 0.0012273794 0.0013293162 0.0031451934 0.0006952107 0.0011345351 0.0017447559 0.0006145005 0.0015183008 0.0015436210 0.0009783909 -0.0007746748 0.0018563124 -0.0016705913 0.0011320910 -0.0015497921 0.0016362054 -0.0036150277 0.0301268162 -0.0345714103 -0.0513126400 -0.0107657641 0.0007875415 -0.0008573297 -0.0008155012 -0.0016126519 0.0018922173 -0.0008893125 -0.0007954414 0.0020786912 -0.0077011395 0.0013170030 0.0226219181 -0.0072617125 0.0167780668 -0.0005481800 0.0485832566 -0.0169271215 -0.0735759912 0.0352862596 -0.0097881284 0.0492478394 -0.0757342728 -0.0044248975 -0.0011622301 0.0016268147 -0.0001819854 0.0006910664 0.0006691731 -0.1826209789 0.1767470774 -0.1221153502 0.1355674546 -0.1844391114 -0.0834406518 0.1078086682 -0.1929576288 -0.0543679189 -0.0103578864 -0.0377793484 0.3275911542 -0.0252386138 0.0281421391 0.1940336268 0.0181136214 0.1924303699 -0.1887206670 -0.0228807773 0.1393354747 0.3533207194 0.0304788315 -0.0682850708 0.1550741960 0.0462440790 -0.4303767809 -0.2709470247 0.0017381527 -0.0013842221 -0.0015355141 0.0014345953 0.0058684677 0.0041327265 0.0019238384 -0.0004080729 -0.0011546039 -0.0123383749 0.0335270774 -0.0204558310 -0.0038988878 -0.0284554314 -0.0078527671 0.0107175319 0.0019330830 -0.0298701443 0.0238537172 -0.0190101525 0.0055880759 0.0153086574 0.0298272124 0.0037231027 0.0038679472 0.0012833695 0.0319287505 0.0004458707 -0.0781741691 0.0480730156 -0.0094127305 0.0143178119 -0.0151913590 -0.0000768371 -0.0247016487 0.0140434403 -0.0171979027 0.0256323244 -0.0033343985 0.0034776788 -0.0603098271 0.0578974382 -0.0223538369 0.0169212765 0.0505575224 -0.0089128711 -0.0132088405 0.0557855882 0.0437072901 0.0400433602 0.0155158262 0.0433702178 -0.0080694862 -0.0239194289 0.0288299880 0.0202488734 -0.0438297167 0.0104455025 0.0963707352 0.0203323969 -0.0498209740 -0.0254275160 0.0057285935 0.0020316296 0.0301212755 -0.0108754426 -0.0090162171 -0.0279449837 -0.0133636483 0.0389781134 0.1029472417 -0.0090029297 -0.0141195609 0.0057671717 -0.0122695645 -0.0090660446 0.0166615037 0.0060063357 -0.0344388747 -0.0136438908 0.0152902741 -0.0101326638 -0.0278546408 -0.0245675184 0.0096818792 0.0052063387 -0.0067971180 0.0102594417 -0.0044885156 -0.0007403947 0.0105681167 0.0236605528 -0.0126220188 -0.0029305308 0.0014321311 -0.0005509306 0.0219055506 0.0271161961 -0.0044669480 0.0105466557 -0.0155487340 0.0165768789 0.0069759584 -0.0232236642 0.0080422907 -0.0038787575 -0.0039186662 0.0006328470 0.0147273770 -0.0206996732 0.0165630127 0.0093218580 0.0154459890 0.0020494331 0.0127127484 0.0001537582 -0.0067985627 0.0000281839 0.0157536266 0.0209150152 -0.0159146375 0.0217819180 -0.0043390257 -0.0016710165 -0.0150091638 -0.0210114600 -0.0013692182 0.0231936495 0.0034116655 0.0340669344 -0.0272311919 -0.0510377814 0.0255427802 -0.0255218224 0.0323933800 -0.0010883598 0.0042564630 0.0366789519 0.0669142722 -0.0517992615 0.0004154778 0.0374066885 0.0424514723 0.0257311338 -0.0002269415 -0.0004161138 -0.0000548602 -0.0030380102 -0.0005603963 0.0002250647 0.0010613492 0.0019922466 0.0003512149 -0.0018328536 -0.0003380883 0.0003874825 0.0030535460 -0.0025305772 0.0003148310 0.0001792200 -0.0042437007 0.0017862935 -0.0010028396 0.0019356538 0.0005784394 0.0033756452 -0.0019891323 -0.0007180712 -0.0322048068 0.0092694710 -0.0304430911 -0.0005316464 0.0049203851 0.0411394846 -0.0094934043 -0.0072052744 0.0110160156 -0.0031818244 0.0118836655 0.0136005217 -0.0132935392 0.0172524905 0.0114683658 -0.0353891443 -0.0103740262 0.0175098858 0.0194647483 -0.0354966643 -0.0199295706 -0.0134373509 0.0606415856 -0.0583816584 -0.0247337377 -0.0453313312 -0.0761200524 -0.0341481673 0.0722315394 -0.0465568602 -0.0378306315 0.0373053079 0.0578885817 0.0030322746 -0.0173095827 -0.0108047432 0.0296184748 -0.0251068410 -0.0058119769 0.0148511580 0.0118465128 -0.0106974198 -0.0067658656 0.0043117285 0.0127063585 -0.0246578273 0.0125933952 -0.0303984890 -0.0033083745 -0.0005655824 -0.0056224928 0.0002426746 -0.0011471099 -0.0015626505 0.0003471533 0.0011475823 0.0004350305 0.0000203852 -0.0014087574 0.0020648520 0.0013827689 0.0004927986 0.0014907250 0.0011927102 0.0017675590 -0.0011433667 -0.0018303339 0.0018405397 -0.0021982746 -0.0011727208 0.0025184566 0.0014971861 -0.0015350354 0.0018095778 0.0024165973 0.0004246376 0.0013169195 -0.0026633140 0.0013753567 -0.0021266411 0.0053141389 -0.0017091506 -0.0002944914 -0.0009731576 0.0052006720 -0.0071645192 0.0138312095 0.0000762992 -0.0002104019 -0.0029894185 -0.0000003311 0.0006152949 0.0030948703 0.0031737936 0.0008710560 0.0019548072 0.0014995991 -0.0010588558 0.0029136738 -0.0025382609 -0.0006186122 -0.0031686428 -0.0008249689 0.0008337118 -0.0039367840 0.0066075395 -0.0002048248 0.0105483324 0.0050865577 -0.0034626236 0.0110174287 -0.0017241714 -0.0007410390 -0.0008477778 0.0004366930 -0.0026703776 -0.0010892362 0.0046004989 -0.0003841030 0.0124805034 -0.0007748842 -0.0012012739 -0.0014521730 0.0037631320 -0.0068055812 0.0447665890 -0.0479910083 -0.0531526715 -0.0159129496 -0.0009974855 0.0006535673 0.0021202870 -0.0006511897 0.0018575202 -0.0054057127 0.0018502677 -0.0031858400 0.0092606399 -0.0005064744 -0.0247457000 0.0056586230 -0.0221449260 0.0012047132 -0.0432666225 0.0183289923 0.0729153685 -0.0358328907 0.0104316594 -0.0458855038 0.0770160880 0.0048964324 0.0004233913 -0.0002530099 0.0002514917 -0.0009293415 -0.0005784939 0.1741585894 -0.1554546256 0.1111847027 -0.1406612020 0.1989801228 0.0702471003 -0.0893043513 0.1796009783 0.0598194787 0.0007750342 0.0321990205 -0.3021550708 0.0226850471 -0.0195608811 -0.2070055972 -0.0202394418 -0.1834530995 0.1809429775 0.0217483270 -0.1354040139 -0.3436534609 -0.0309213115 0.0729090978 -0.1460642367 -0.0461814023 0.4244769820 0.2682727952 -0.0015315060 0.0006554928 0.0010223636 -0.0016450647 -0.0054987272 -0.0046674029 -0.0022863357 0.0014083203 0.0016717852 -0.0234336362 0.0366407321 -0.0188804237 -0.0052001096 -0.0371152264 -0.0147117290 0.0111895142 -0.0036696070 -0.0379503036 0.0332178124 -0.0301489952 0.0108136776 0.0193361599 0.0370335791 0.0114111874 0.0071857483 0.0060262502 0.0423790027 0.0089567748 -0.0913670014 0.0492350852 -0.0169091818 0.0161390336 -0.0184696070 0.0016871682 -0.0287109787 0.0159950866 -0.0229980677 0.0400285202 -0.0060506933 0.0175089106 -0.0598689115 0.0596195964 -0.0249116975 0.0192278447 0.0628413609 -0.0116761831 -0.0084149468 0.0655855624 0.0566633084 0.0438635576 0.0203643508 0.0496073069 -0.0037973290 -0.0341651724 0.0376095908 0.0192422725 -0.0534206286 0.0276384337 0.0906596898 0.0343758429 -0.0583824006 -0.0310145846 0.0061825264 0.0056446482 0.0268497607 -0.0070558930 -0.0131178250 -0.0319196553 -0.0201675345 0.0623743132 0.0993302004 -0.0035180842 -0.0201842599 0.0058035967 -0.0159368534 -0.0133857310 0.0211887891 0.0100234141 -0.0431476652 -0.0133039884 0.0175243635 -0.0141948850 -0.0314377129 -0.0322013997 0.0135474327 0.0051861310 -0.0083137210 0.0119196175 -0.0070261294 0.0003524108 0.0157966244 0.0304613886 -0.0163357617 -0.0005527457 0.0030398317 -0.0019826219 0.0279021090 0.0350196632 -0.0059238199 0.0180157482 -0.0214957008 0.0202144425 0.0071392345 -0.0298995902 0.0100684037 -0.0074859675 -0.0031720994 0.0009111549 0.0193208960 -0.0267481703 0.0210007368 0.0080618518 0.0197236571 0.0041841176 0.0145426117 0.0016955412 -0.0087105260 0.0008234026 0.0200887976 0.0245681351 -0.0177229926 0.0268294216 -0.0060831447 -0.0033886827 -0.0183464472 -0.0247283934 0.0019460803 0.0287558711 0.0045128268 0.0385587498 -0.0328444159 -0.0596733993 0.0298711489 -0.0294627984 0.0390824444 -0.0003006391 0.0040439074 0.0441450337 0.0775922111 -0.0609549304 0.0000252023 0.0467547814 0.0492917767 0.0303961244 -0.0007238794 -0.0006081178 0.0000949363 0.0019741087 0.0000280347 -0.0006887507 -0.0020212711 -0.0030547558 -0.0003165264 -0.0006334159 -0.0012697820 -0.0004032684 -0.0028215284 0.0035736914 -0.0008812065 -0.0041525066 0.0029760837 0.0000702846 0.0068919046 -0.0034226961 0.0006515177 -0.0055161761 0.0035165030 -0.0004293938 -0.0056054465 0.0030793501 0.0022271538 0.0043758788 -0.0087663000 0.0004497333 -0.0005438023 -0.0075382478 0.0027147328 0.0004448162 0.0019668154 0.0004452210 0.0004002412 0.0018141757 -0.0037713295 -0.0069863731 0.0114576672 -0.0001051824 0.0103923959 -0.0015505109 -0.0046215778 -0.0038279523 -0.0045031044 0.0040067768 0.0019575625 0.0098898517 0.0070491465 0.0083271813 -0.0211508378 -0.0188217780 -0.0000899822 -0.0039650431 -0.0114540691 0.0022101257 -0.0002103103 -0.0039041834 0.0006459298 0.0044564940 0.0029368380 -0.0019330913 -0.0029748686 -0.0032062540 -0.0000870442 -0.0037480301 0.0041539894 0.1518275726 -0.0771751682 0.1611225756 -0.0134977848 0.0103645634 -0.0203254005 0.0047701552 -0.0021080108 0.0127248731 -0.0074395490 0.0013941767 -0.0090035517 -0.0006802024 0.0035757302 -0.0025679068 -0.0029812795 -0.0011385222 -0.0042392402 0.0003980679 -0.0058267969 0.0083309263 0.0106726940 -0.0052745376 0.0132992795 -0.0330038965 0.0170584350 -0.0583854508 -0.0187451168 0.0077689866 -0.0403147197 -0.0064206426 -0.0007534269 -0.0012799360 -0.0070078352 0.0099480472 -0.0294933789 -0.0034030191 -0.0064890640 0.0028812112 -0.0748837259 0.0631100995 -0.1521270436 -0.0383923872 0.0231547582 -0.0779663768 0.0180615185 -0.0178187490 0.0271306005 0.0089480878 -0.0050903068 0.0419953019 0.0237913664 0.0056735796 0.0354960347 -0.0269647162 0.0236140218 -0.0842905692 -0.0523039873 0.0101534127 -0.0877826319 0.1722443232 -0.0661236657 0.3902921607 0.1753832440 -0.0724086495 0.3641185584 0.0586361285 0.0067029514 0.1576358263 0.0606705272 -0.0146892568 0.1848428556 0.1833487417 -0.0723624669 0.4224817637 -0.0003174026 0.0051611554 -0.0029146419 -0.0044242239 0.0044830821 -0.0080877388 0.0351214432 -0.0353553219 0.0167350801 -0.0236986848 0.0345878034 -0.0668298960 0.1073821999 -0.1624960315 0.2592275163 -0.0244283704 0.0320142258 -0.0522240221 -0.0008504735 0.0037824332 0.0096982044 -0.0044894019 -0.0092991068 0.0111162137 0.0011872680 0.0147622780 -0.0226154865 -0.0116654074 -0.0134651495 -0.0071492604 -0.0159723716 0.0342637098 -0.0600647010 -0.0020924994 0.0010584401 -0.0050430962 0.0020928305 0.0285840854 -0.0152170270 -0.0079629649 0.0257812164 -0.0209678091 0.0638811674 -0.0547348008 0.0087639564 -0.0016164830 0.0109153134 -0.0402983037 -0.0033205213 0.0188023882 -0.0510448307 0.0004631076 -0.0055027920 -0.0060912584 0.0179095295 0.0151508145 -0.0000792188 0.0118160730 -0.0525213000 -0.0596648635 0.0200268738 0.0109604245 0.0099712514 -0.0089946233 0.0287163229 0.0271251630 0.0050791147 -0.0272789740 0.0138171356 0.0075674848 -0.0453671014 -0.0142789414 -0.0057364397 0.0051925044 -0.0021221352 -0.0011370270 -0.0061884083 -0.0053682746 0.0001092128 -0.0014328980 -0.0076348866 0.0069889516 -0.0052882927 0.0016754854 0.0039725843 0.0046453586 0.0045225960 0.0032032144 0.0020461617 0.0075820653 0.0023850864 -0.0152089925 0.0054043345 -0.0090888394 0.0005100280 0.0006901977 -0.0012151551 -0.0024418061 -0.0008164387 -0.0036897217 0.0080818315 -0.0014288400 0.0091483936 -0.0062974319 0.0053324381 -0.0040468526 0.0223369781 -0.0133801154 0.0201824751 -0.0322512219 0.0013773302 -0.0205772474 0.0131983745 -0.0095712231 0.0036461483 -0.0348470457 0.0217228723 -0.0238540158 0.0155647646 0.0088589603 -0.0686062974 0.1207678589 -0.0438593890 0.0146049223 0.0064728786 0.0050899334 -0.0197773010 0.0511074398 -0.0347915419 -0.0048451028 0.0118101816 0.0072907567 -0.0946068258 0.1196641368 -0.0375119259 -0.0037252935 0.0011560242 -0.0016442804 -0.0022146185 0.0018300352 0.0023412862 0.0123335564 -0.0169617299 0.0026544702 0.0118289427 -0.0099508432 0.0157213959 0.0007401477 -0.0054891091 0.0006820680 -0.0029758868 -0.0002198659 0.0012278797 0.0023205623 -0.0035836222 0.0020232044 0.0059612044 0.0016121928 -0.0027348773 -0.0038939793 -0.0022133940 0.0049179244 0.0066372940 -0.0001128872 -0.0028058749 -0.0044322779 0.0034769095 -0.0015328731 -0.0042930744 0.0036060373 0.0004578823 -0.0014476800 0.0028161849 -0.0034956186 -0.0088965078 -0.0028137565 0.0044373901 0.0055919270 -0.0060648242 0.0032074768 -0.0069493208 -0.0053387735 0.0025292272 -0.0004950471 0.0018199270 0.0067156341 0.0097515259 0.0059978581 0.0026540868 -0.0102612321 0.0007541459 0.0007292212 0.0155817483 -0.0016709674 0.0068440525 -0.0018900299 -0.0039478955 -0.0063320015 -0.0088283335 0.0041552646 -0.0087144840 0.0081844940 -0.0034419874 -0.0018591529 -0.0139251146 -0.0037986151 -0.0078245714 -0.0057276016 0.0087228890 0.0016937944 -0.0233050582 -0.0281675480 0.0334584041 -0.0135955930 -0.0085935482 0.0115831917 0.0399242301 0.0480173677 0.0210277385 0.0049224942 0.0084923143 0.0027373591 -0.0489349045 0.0374701952 0.0492045697 0.0368253688 -0.0174429938 0.0034574872 0.0432867987 -0.0195834868 0.0326674914 0.0006525759 0.0016198515 0.0016048478 -0.0121058240 0.0169371916 0.0016267486 -0.0037880861 0.0128456664 -0.0062964229 -0.0062772452 0.0031467962 0.0085194464 -0.0000189279 0.0010023448 -0.0055272346 0.0375381585 -0.0573818176 -0.0106595675 -0.0410463534 0.0041640720 0.0157719146 0.0184194460 0.0080120897 -0.0097911892 -0.0253483128 -0.0314455875 -0.0089057430 -0.0060331180 0.0605358501 0.0685980161 0.0073515835 0.0130724766 0.0384921439 0.0033086405 -0.0033187592 0.0036675776 -0.0044692917 -0.0016809967 -0.0071245258 0.0008194737 0.0004392871 0.0029147379 -0.0075100825 0.0046532791 -0.0048940510 0.0565905746 -0.0282663001 0.0638574933 0.0077129093 -0.0025124678 0.0173597813 0.0012974816 0.0017840402 0.0058103947 -0.0004122778 -0.0004895425 0.0003415042 -0.0000068840 0.0033794553 -0.0041763058 -0.0073562523 0.0026657242 -0.0104800777 -0.0011839484 -0.0010363218 0.0012652614 0.0054125847 -0.0037698891 0.0066811205 -0.0038700692 0.0041364085 -0.0112987069 0.0128744832 -0.0076109768 0.0126985997 0.0115722392 -0.0080235675 0.0206742520 -0.0049898039 0.0053606654 -0.0118168548 -0.0007508353 -0.0025488179 0.0023787081 -0.0261356814 0.0221642948 -0.0528511129 -0.0119862175 0.0074934794 -0.0241687097 0.0052665902 -0.0056804870 0.0072676815 0.0024865147 -0.0014101190 0.0120581695 0.0069941879 0.0020964292 0.0100274912 -0.0082344571 0.0075479452 -0.0263498006 -0.0164979218 0.0030088358 -0.0274342088 0.0558647594 -0.0214706856 0.1249103873 0.0561318992 -0.0225331359 0.1166531427 0.0221830524 0.0007916587 0.0546018834 0.0215170027 -0.0056470317 0.0643575669 0.0590626429 -0.0236144206 0.1365634365 0.0017668208 -0.0006566332 -0.0014393260 -0.0020868281 0.0024437479 -0.0152800204 -0.1374394712 0.1327491518 -0.0656541352 -0.0076205390 0.0112453754 -0.0236787892 0.0374961174 -0.0566448620 0.0891841453 -0.0095506594 0.0120904295 -0.0197186475 -0.0013791970 0.0061663245 -0.0019143533 0.0090537569 -0.0055126439 0.0027962341 -0.0095325765 -0.0037156544 0.0064495925 -0.0039172003 0.0013179280 -0.0079707044 -0.0053192176 0.0123390206 -0.0207042051 -0.0008647990 0.0007498474 -0.0013959338 -0.0026044995 -0.0071621439 0.0008075337 0.0181429198 -0.0284607820 0.0044345281 0.0012193392 -0.0096192747 -0.0032041128 0.0121072040 0.0094915892 -0.0060115289 -0.0005978228 -0.0191680032 0.0402286703 0.0144127792 0.0011242371 -0.0033531678 0.0028275140 0.0159931003 0.0276541415 0.0054669433 -0.0184490694 -0.0025630330 0.0082494900 -0.0304286534 -0.0191227727 -0.0036075908 0.0108899019 0.0103592295 0.0014479393 -0.0097618426 0.0049086092 0.0021554865 -0.0149963167 -0.0042204230 -0.0142759963 -0.0277926170 0.0252341972 0.0091815640 0.0121073320 -0.0115264740 -0.0048551233 -0.0202093039 0.0163256450 0.0026318780 0.0130319472 -0.0104464492 -0.0071949734 -0.0224868875 0.0156550053 0.0062531396 0.0117035154 -0.0143574460 0.0413766500 0.0739689718 -0.0689683797 0.0037566321 -0.0060781663 0.0001811329 0.0072111478 0.0366266597 -0.0230294448 0.0030791595 -0.0051090949 0.0022996781 0.0369461279 0.0725098959 -0.0695588709 0.0192690152 -0.0805701347 0.0559700007 -0.0699211583 0.1246541644 -0.0006356760 0.0842001217 -0.0515425139 0.0387637404 -0.0133424870 0.1251508972 -0.0870395744 0.0910971520 -0.0638076135 -0.0384145878 0.2695633900 -0.4436145535 0.1676132481 -0.0543349069 -0.0139219499 -0.0190809453 0.0704681813 -0.1829731153 0.1236509162 -0.0051891058 -0.0242447094 -0.0392582453 0.3476754228 -0.4326509600 0.1322095410 -0.0031454786 -0.0101463942 0.0077511208 -0.0011619218 -0.0113075749 0.0076742558 -0.0478677695 0.0608804572 -0.0088120635 -0.0443373858 0.0336724073 -0.0600039509 0.0035222948 0.0103155456 -0.0075982783 0.0090347596 -0.0041073245 0.0039779455 0.0051890463 0.0205052377 -0.0065025552 -0.0077686213 -0.0014131516 -0.0012144732 0.0202952972 0.0218242247 -0.0030607564 -0.0014203303 -0.0117386771 0.0033346840 0.0103488975 -0.0215299130 0.0035521128 0.0049577423 -0.0044784236 0.0033460335 0.0114240509 -0.0220675542 0.0042708293 0.0194756183 0.0162692146 -0.0009644001 -0.0204377357 0.0266287570 -0.0121979611 0.0302788234 0.0177811056 -0.0100555330 0.0061907832 -0.0002589850 -0.0272803321 -0.0408809190 -0.0206725985 -0.0080983682 0.0583301396 -0.0008297806 -0.0089859087 -0.0526981856 -0.0007311021 -0.0234308368 0.0021914653 0.0135036866 0.0284208157 0.0337116619 -0.0180307957 0.0298133735 -0.0333723917 0.0105401355 0.0107726109 0.0665890241 0.0085889690 0.0185497706 -0.0017878230 0.0027745471 0.0004959331 -0.0093168070 -0.0100785567 0.0116219855 -0.0036777622 -0.0015096829 0.0039578058 0.0128711914 0.0165732826 0.0076310135 0.0021704943 0.0017186322 0.0007127822 -0.0163651124 0.0170246959 0.0185764782 0.0133285799 -0.0081774407 -0.0000307840 0.0146553743 -0.0077207021 0.0103507909 -0.0174216328 0.0360130843 -0.0171039865 0.0819500616 0.0153820599 0.0283469293 0.0179436992 0.0037419529 -0.0077567670 -0.0197350491 0.0294214687 0.0071355335 -0.0113687609 0.0335245324 -0.0307632427 0.0185766077 -0.0033532839 -0.0030126359 0.0255410240 0.0017835079 -0.0189538974 -0.0027143148 -0.0034399300 -0.0099685495 -0.0266577760 0.0099203623 0.0056871710 0.0253031142 -0.0291116683 -0.0401204627 -0.0002131525 -0.0019386363 0.0110414650 0.0113190448 0.0069678994 0.0188395934 -0.0025244523 -0.0093347878 -0.0070273219 -0.0015320290 -0.0006908567 0.0023102398 -0.0024751573 0.0007235668 -0.0025339054 0.0276375011 -0.0152548691 0.0352729536 -0.0029960437 0.0000604750 -0.0035590106 0.0024504066 -0.0013961884 0.0032994669 -0.0040582888 0.0013967333 -0.0038903490 -0.0005535574 0.0002593458 -0.0018698410 -0.0005000767 0.0012315448 -0.0013797128 0.0009807648 -0.0016144140 0.0035892152 0.0027347507 -0.0014594501 0.0039581542 -0.0078730089 0.0047165697 -0.0138857596 -0.0051349348 0.0037866507 -0.0097116219 0.0009915930 -0.0029929439 0.0030199868 -0.0040741057 0.0014969448 -0.0040649881 0.0029075924 -0.0006673695 0.0040572088 0.0029752210 -0.0005467606 0.0047376419 0.0013023400 -0.0007565748 0.0004603514 -0.0016819944 0.0017722846 -0.0010502186 0.0008816415 0.0007053452 -0.0018416086 -0.0015989575 -0.0008659428 -0.0013487885 -0.0013259477 -0.0013737473 -0.0002041673 0.0006316674 0.0002779419 -0.0007936193 0.0036826295 -0.0001155219 0.0070598540 0.0025178741 0.0033269245 0.0082512958 0.0121750667 -0.0087901133 0.0054816991 0.0054030366 -0.0045483176 0.0107137331 0.0029823122 0.0000854347 0.0107302946 -0.0000495146 -0.0005779293 -0.0008963135 0.0013612891 0.0092491221 -0.0018636684 0.0023240496 -0.0419575418 0.0032969813 0.0026379426 -0.0026927912 0.0090946087 -0.0080769358 0.0148063448 -0.0202941768 0.0005133044 -0.0000667558 -0.0023652305 -0.0049858913 0.0076243927 -0.0202704092 0.0340004051 -0.0080563573 -0.0135524163 -0.0388755847 -0.0160930217 0.0403098812 0.0120794182 0.0126867375 0.0067261564 0.0029369783 -0.0026143545 0.0039610919 0.0007020592 -0.0015539561 -0.0003178409 0.0216285484 -0.0993811407 0.0493385795 0.0448087076 -0.0929070743 0.0592898451 -0.1053905149 0.0913768163 -0.0009514770 0.0624925182 0.0418016975 -0.0582384866 0.0084945637 -0.1116593294 0.1950196065 0.0623356417 -0.0214178516 0.0193566853 -0.0178693807 -0.0187777187 -0.0109219142 -0.0134848297 0.0553898374 0.0604088071 -0.0229077198 -0.0047851792 -0.0080610098 0.0010065248 -0.0033421286 -0.0024635873 -0.0002157782 -0.0004647988 -0.0026385096 -0.0009115272 0.0016192609 0.0012849993 -0.1134166694 -0.1052144934 0.1160397658 0.0295667308 0.0157370913 -0.0879244157 -0.0317832293 -0.1252945156 0.0376162761 0.0607729826 0.0288291963 -0.0413064105 -0.0166198419 -0.0758570437 0.1083743899 0.0422154998 0.0722680726 -0.0170179734 0.2526399876 0.3324277386 -0.3645898272 -0.0104065464 0.0418364636 -0.0674862038 0.0558780134 0.1916946660 -0.1219950772 -0.0087835898 0.0606247664 -0.0218777208 0.2460024508 0.3560855217 -0.3336653477 -0.0072509302 0.0167323659 0.0204865005 0.0092586393 -0.0204019691 0.0285736133 0.0124664087 0.0213223206 0.0043170541 0.0140887104 -0.0277984332 -0.0091835978 -0.0024717184 0.0050232205 -0.0202060258 -0.0380860103 0.1349503314 -0.0190048917 -0.0270132100 0.0232360633 -0.0017926022 -0.0096742119 0.0514587526 -0.0286536877 -0.0386247041 0.0168074160 -0.0195819709 -0.0519871009 0.1271554937 -0.0387729999 -0.0457534871 -0.0612637495 0.0219299546 -0.0262903642 -0.0395952262 0.0632731168 -0.0093884322 -0.0183729982 0.0102204268 0.0048970368 -0.0214412886 -0.0034253471 0.0148400119 -0.0277908937 0.0036771681 -0.0083070011 -0.0221870274 0.0187181238 0.0177593087 0.0009937815 0.0025976689 0.0263134273 0.0177344478 -0.0155857913 -0.0190972030 0.0031989344 0.0036277668 0.0367052928 -0.0115625661 -0.0225620055 -0.0067746781 -0.0250302787 0.0047727596 -0.0248416497 0.0216587803 0.0028316112 0.0326631431 -0.0330190525 -0.0114142755 -0.0276855055 0.0164518697 0.0002234779 0.0095146788 0.0003331428 -0.0024655067 -0.0073631309 -0.0014032657 0.0120454925 -0.0036234610 0.0123576430 0.0001938311 0.0005584907 -0.0004889896 -0.0051997196 0.0120595037 0.0068109191 -0.0057928321 0.0296189551 -0.0179083149 -0.0177880310 0.0039204711 -0.0135072027 0.0131249574 -0.0055990937 0.0037445898 0.0055584712 0.0371060077 -0.0266442441 0.0017559129 0.0245627045 0.0089032884 -0.0089024455 0.0010947888 -0.0001631966 0.0002553438 0.0057762124 0.0069594177 -0.0055867244 0.0014605627 0.0015392327 -0.0044335085 -0.0080309536 -0.0076525033 -0.0033932728 -0.0016076865 0.0003856672 -0.0001210831 0.0066611372 -0.0027278696 -0.0067502600 -0.0050134758 0.0012370369 -0.0024723748 -0.0085088396 0.0021760825 -0.0009504152 0.0017333475 0.0062557968 -0.0027659677 0.0181526335 0.0075949689 0.0030892420 0.0058697931 0.0053329127 -0.0039808538 -0.0041718690 0.0052316534 -0.0000683966 -0.0024233468 0.0053254510 -0.0059044808 0.0088864608 -0.0018751581 -0.0007922410 0.0027642739 0.0038586530 -0.0013366269 0.0002543508 -0.0002087580 -0.0025206893 -0.0053578204 0.0027501523 0.0011846337 0.0024312936 -0.0021804307 -0.0047362485 0.0010513698 -0.0017496410 0.0042794795 -0.0001937529 0.0029895646 0.0070355857 -0.0010672219 -0.0032053378 -0.0032296681 -0.0024214964 0.0012238224 0.0002268962 -0.0013127147 0.0017404555 -0.0019761290 -0.0927027224 0.0516097013 -0.1132036341 0.0115290492 -0.0027800830 0.0159878160 -0.0048052550 0.0039057513 -0.0072887782 0.0047469115 -0.0029949771 0.0069805509 -0.0002975195 0.0006377119 0.0031347946 0.0023998772 -0.0026293144 0.0032458936 -0.0049670313 0.0017206938 -0.0075207191 -0.0062535844 0.0031951309 -0.0078312050 0.0207295721 -0.0096913974 0.0387799178 0.0184744042 -0.0112304928 0.0268413970 0.0026893239 -0.0028233706 0.0040198626 0.0129440476 -0.0050927598 0.0148307037 -0.0071308201 0.0036651055 -0.0114742938 0.0024543129 -0.0061256083 0.0073169350 0.0035721261 -0.0009877600 0.0083627156 0.0013698548 -0.0010611285 0.0016124363 -0.0009075695 0.0000519867 0.0009102364 -0.0005258473 0.0011690255 -0.0035555862 0.0048668357 -0.0009999881 0.0097696626 0.0040672668 -0.0019696276 0.0129937103 -0.0299607600 0.0100773329 -0.0699284048 -0.0221777360 0.0128547553 -0.0504927485 -0.0180924677 0.0049571932 -0.0451668782 -0.0259175928 0.0102134757 -0.0590154698 -0.0322722780 0.0101517457 -0.0788145244 0.0024278012 -0.0025546929 0.0019227658 0.0027346240 -0.0023613572 0.0023095981 -0.0041845129 -0.0025133319 -0.0015313440 -0.0021729118 0.0008430594 -0.0113792436 0.0033731611 -0.0091487327 0.0100726947 0.0041416155 -0.0071814653 0.0105213315 0.0207483253 -0.0221906832 0.0592843077 -0.1063867825 0.0213726936 0.0468278385 0.0893333508 0.0412081831 -0.1138589138 -0.0180346388 -0.0303811393 -0.0235568094 -0.0075637312 0.0005061976 0.0002641082 -0.0016183010 0.0037073119 0.0020618759 -0.0686021704 0.3193158849 -0.1581927208 -0.1398388766 0.2932858427 -0.1907522676 0.3410426511 -0.2983431402 0.0060335088 -0.1513721849 -0.0909883113 0.1439897450 -0.0242461340 0.2812865521 -0.4499034584 -0.1346101185 0.0912655834 -0.0991788735 0.0246386948 0.0162259998 0.0154879859 0.0226705907 -0.1007662922 -0.0999792137 0.0389770720 -0.0326035899 -0.0131978466 -0.0000133754 0.0026417303 0.0010900303 0.0003793307 0.0089142260 0.0066987900 0.0023787645 0.0015398915 -0.0016622350 -0.0197459496 -0.0266972398 0.0264538553 0.0048593570 0.0046811287 -0.0129616350 -0.0073983826 -0.0220674363 0.0108439880 0.0077291434 0.0086244226 -0.0087680725 -0.0049694411 -0.0169489125 0.0185145297 0.0071205978 0.0119841675 -0.0057725195 0.0420117862 0.0645261638 -0.0667533426 -0.0025148676 0.0025701212 -0.0063010894 0.0092136189 0.0326267200 -0.0202416355 -0.0025977592 0.0018421723 0.0009557686 0.0427175123 0.0692143688 -0.0643099555 -0.0002143123 -0.0022482544 0.0057348146 -0.0017450783 0.0002551928 0.0050652608 0.0047881592 0.0019170535 0.0021270128 0.0015582833 -0.0006449971 -0.0046628215 0.0025745892 -0.0017967910 -0.0048568602 0.0010543635 0.0108193327 0.0008712930 -0.0103237373 0.0081160938 -0.0028484130 0.0008632495 0.0034435298 -0.0009085689 -0.0081517764 0.0028901244 -0.0050639316 0.0016309422 0.0081686212 -0.0031292487 -0.0059334386 -0.0105830641 0.0038646444 -0.0035723309 -0.0070295754 0.0094267677 -0.0032537383 -0.0012199733 0.0016506349 -0.0003019651 -0.0026514850 -0.0026207983 0.0018926576 -0.0044905403 0.0012340928 -0.0015152500 -0.0043214054 0.0030742347 0.0012465211 -0.0011364249 0.0013670357 0.0030174141 0.0031403248 -0.0016784017 -0.0059475370 -0.0023325870 -0.0022764533 0.0028812828 -0.0008491535 -0.0071388639 -0.0000283718 -0.0045911677 0.0012797774 -0.0030507042 0.0035314530 0.0003296841 0.0063148238 -0.0066608830 -0.0032509751 -0.0031780894 0.0027580748 -0.0043984138 -0.0002963304 0.0009784844 -0.0004561021 0.0005644789 -0.0002863407 0.0005566959 -0.0008598112 -0.0002963609 -0.0014375610 -0.0026217473 -0.0009774860 -0.0010551908 0.0046379602 -0.0020431335 -0.0028997379 0.0013030654 -0.0017121172 -0.0054582083 0.0002005591 -0.0004292654 0.0029684529 0.0013501148 -0.0000561463 0.0019035711 0.0029548947 -0.0020570150 0.0011269993 0.0079652822 0.0012999257 -0.0012469741 -0.0013436710 -0.0011604161 -0.0008656442 -0.0117967771 -0.0120743754 0.0078789490 -0.0000621772 -0.0004536344 0.0080641718 0.0106001427 0.0094588958 0.0046906187 0.0045646681 -0.0032752384 0.0001630580 -0.0066236683 -0.0032553072 0.0078052047 0.0054711971 0.0029618333 0.0086769829 0.0141794615 -0.0002616100 -0.0063312572 -0.0010601549 0.0004709976 0.0010225439 -0.0021157696 0.0004854672 0.0003808857 -0.0011536583 0.0001982209 -0.0000971209 0.0005814701 -0.0018812308 0.0021871920 0.0020241296 -0.0010600454 -0.0014783362 -0.0002782351 -0.0029332405 -0.0021036698 -0.0024465218 -0.0024499340 0.0011508196 0.0009873806 -0.0002242614 0.0009645674 -0.0011779063 0.0005003734 0.0020478826 0.0022666940 0.0000608955 0.0018991925 -0.0003084803 0.0017101770 -0.0011927929 0.0006484646 0.0005034067 -0.0010695452 0.0003608761 0.0015616101 -0.0002244549 -0.0010454312 -0.0029661496 0.0004870478 0.0008865198 -0.0022160068 0.0014397455 0.4068373759 -0.2282238772 0.4958823543 -0.0506086886 0.0159265403 -0.0694384776 0.0267093498 -0.0185020709 0.0446402407 -0.0378140157 0.0217591238 -0.0550239917 -0.0020529656 0.0008159838 -0.0178468532 -0.0178641822 0.0138040123 -0.0257800275 0.0243799331 -0.0107233275 0.0374460858 0.0430346195 -0.0212000911 0.0579868895 -0.1231142290 0.0600340747 -0.2229201074 -0.0771837451 0.0458256742 -0.1171263534 0.0244318082 -0.0089202007 0.0377595265 -0.0494830333 0.0176325824 -0.0560256511 0.0291841213 -0.0131210750 0.0472040782 -0.0192414204 0.0356841240 -0.0401627323 -0.0052732842 0.0020089326 -0.0128160369 -0.0091364606 0.0058654924 -0.0157398315 -0.0006054586 0.0013233517 -0.0139268720 -0.0017236243 -0.0051767442 0.0051760058 -0.0145042429 -0.0001336461 -0.0261596426 -0.0102753940 0.0055080464 -0.0395299329 0.1005641387 -0.0334957669 0.2347267111 0.0690551933 -0.0391104500 0.1610211083 0.0773948421 -0.0269310014 0.1725698960 0.1057396838 -0.0432432636 0.2391445005 0.1119449074 -0.0343782518 0.2733213892 -0.0078370197 0.0099694222 -0.0111003158 -0.0120462926 0.0272321949 -0.0090413012 -0.0002323624 0.0036598113 -0.0005452264 0.0200988767 -0.0172140990 0.0654516502 -0.0541065028 0.0958362309 -0.1192173400 0.0226479181 -0.0219647618 0.0209385056 0.0044221851 -0.0118452049 0.0248945949 -0.0285459391 0.0120867528 0.0093555207 0.0049682298 0.0111496023 -0.0406906770 0.0015801827 -0.0098666130 -0.0050457941 0.0023141249 -0.0210432741 0.0273693509 0.0036829702 -0.0101050781 -0.0017299741 -0.0251864980 0.0778974089 -0.0370454455 -0.0350818318 0.0684011511 -0.0424120693 0.0612833931 -0.0532209888 -0.0003545712 0.0028043789 0.0150976318 0.0005679908 -0.0049774012 0.0313752338 -0.0791169263 0.0010801886 0.0516765465 -0.0735710854 -0.0026204860 -0.0183348929 -0.0194480093 -0.0010608264 -0.0051970047 -0.0083712558 -0.0016260432 -0.0059083476 -0.0043864112 0.0149427451 -0.0311745918 -0.0258236729 0.0030835914 0.0181871428 -0.0059657743 0.0026727943 0.0032079583 -0.0005052232 -0.0015445897 0.0017942837 -0.0008956359 -0.0002971702 -0.0028141767 -0.0019415926 0.0001024796 -0.0000246580 -0.0030904249 0.0025914845 -0.0014932762 0.0005488624 0.0009830696 0.0023724029 0.0019127487 0.0010081312 0.0011014830 0.0025331600 0.0005912977 -0.0081306574 0.0040633748 -0.0064834998 -0.0015823536 0.0041148456 -0.0021232787 -0.0028555184 0.0002620995 -0.0035377162 0.0003237997 0.0023927290 0.0018888349 -0.0046097179 0.0041300937 0.0016170561 -0.0007186341 -0.0018220679 0.0002573458 0.0030040260 -0.0027442246 -0.0009305333 -0.0024932886 -0.0001331529 -0.0012864254 0.0017173729 0.0013483313 0.0004429005 -0.0010816175 0.0017821711 0.0060201505 -0.0113113693 0.0016041452 0.0036317160 -0.0014911697 -0.0000065340 0.0000689569 -0.0040386410 0.0013951975 -0.0000391738 0.0035902174 0.0006890803 0.0019458952 -0.0077529077 0.0015106312 -0.0008274508 0.0016345994 -0.0003609963 -0.0001683458 0.0005948954 0.0000992358 0.0015016442 0.0010475224 -0.0009703257 -0.0002417375 0.0015337876 0.0010200274 0.0001403186 0.0002835284 -0.0013903002 0.0003287900 -0.0001705257 0.0012171247 0.0012406235 0.0015552287 -0.0003059000 0.0005884745 -0.0001897748 -0.0010568191 0.0023988846 0.0027394029 0.0025995327 0.0018895001 -0.0014548771 0.0011113743 -0.0003653487 -0.0010234865 -0.0004216119 -0.0006213038 0.0003695345 0.0006276651 0.0001589336 -0.0011458384 -0.0006050964 -0.0002637337 0.0010838256 0.0026087961 -0.0009627283 0.0002813979 0.0004444659 0.0011189618 0.0000198946 -0.0011284692 0.0008771034 -0.0000844951 0.0000537280 -0.0003372602 0.0005834937 0.0009894413 0.0027939544 -0.0008435946 -0.0007945394 -0.0000802107 0.0001224103 0.0013800838 -0.0009879740 0.0011091409 -0.0006665713 0.0003483420 -0.0005310479 -0.0008597092 -0.0027741503 0.0017227636 -0.0002599590 0.0001287781 -0.0023172297 -0.0011718330 0.0051840268 -0.0000211727 0.0036046794 0.0423007158 0.0526300174 -0.0385958625 0.0059670778 0.0079742779 -0.0321972935 -0.0578410151 -0.0520135894 -0.0221040314 -0.0032817361 -0.0028568650 0.0030258180 0.0666033458 -0.0338449140 -0.0570209605 -0.0374075288 0.0089963474 -0.0173831821 -0.0583977688 0.0237739547 -0.0200849061 0.0335289839 0.0363472105 0.1406067262 -0.0034400780 -0.0957676845 -0.1518017015 0.0165886609 -0.0383494207 -0.0095562777 -0.0333565480 0.1214442804 -0.0214720316 -0.0756619905 -0.0096768757 -0.1222979195 0.1901287303 -0.0399171809 -0.0498361585 0.0047740886 0.1293298521 0.0011106448 0.0096938598 -0.0545800928 0.0066222618 -0.0997039380 0.0498275619 0.0727008946 0.0561747174 -0.0751058112 -0.0029985830 0.0451687327 -0.0486980588 0.0419790955 -0.0301210223 -0.0722189073 -0.0058233029 -0.0243749406 0.0696859752 0.0145226151 0.0063861515 -0.0085259283 0.0039754166 -0.0086691893 -0.0019069542 -0.0177556591 0.0138048442 -0.0082197296 0.0193622686 -0.0020665707 0.0022077736 -0.0003741959 0.0015847765 0.0000916741 0.0060834850 -0.0016543379 0.0019860544 -0.0054497567 -0.0017926936 0.0014804526 -0.0016607645 -0.0020057620 -0.0011551044 -0.0024414664 0.0038381652 -0.0011003163 0.0001157931 0.0038096440 -0.0007824371 0.0054363012 -0.0071076820 0.0021353518 -0.0113621304 -0.0001174121 -0.0019227159 0.0007130061 0.0083012365 -0.0023425193 0.0072845475 -0.0016595728 0.0000965152 -0.0014274559 0.0011054065 0.0001404803 0.0017136394 -0.0009706659 0.0021430516 -0.0008932947 0.0003542317 0.0002627300 0.0024827832 -0.0004287582 -0.0000001883 -0.0020874533 -0.0011792000 -0.0004514985 -0.0014321880 -0.0008227067 0.0004693656 -0.0014869146 0.0000473298 0.0004036423 -0.0005530350 0.0003272067 -0.0001552750 -0.0003090938 0.0010539671 -0.0012065431 0.0038446321 0.0018924789 -0.0040662863 0.0041538768 0.0029157580 0.0004365969 0.0128977833 0.0049577799 -0.0005755085 0.0107322471 0.0037825745 -0.0019411642 0.0093712620 0.0009035099 -0.0007452173 0.0011155137 -0.0031463386 0.0010609166 -0.0425361611 -0.0763996472 -0.0636554090 -0.0301031827 0.0008120742 -0.0007737902 0.0014755709 -0.0019789774 0.0019008801 -0.0033742404 0.0005511913 0.0005505662 0.0002781103 -0.0004791733 -0.0013391578 0.0025571171 0.0034483823 0.0034907628 -0.0037783990 -0.0018999370 0.0007145825 -0.0047152772 0.0024036883 -0.0032281104 0.0025800141 -0.0001802987 -0.0006438563 0.0008663682 0.0001135035 -0.0000961340 -0.0000228974 -0.0015818865 -0.0141552360 0.0076549248 0.0063909067 -0.0159703478 0.0111965164 -0.0271262674 0.0272699542 0.0002907630 0.0147229924 0.0104106703 -0.0194289512 0.0017912458 -0.0062028984 0.0115106900 0.0026292408 0.0010479595 -0.0061224135 -0.0017929401 -0.0129143870 -0.0209924394 -0.0031993282 0.0082261309 -0.0007518785 -0.0053033341 0.0162514209 0.0092520844 0.0005399248 -0.0008228194 -0.0008538055 0.0002007685 0.0009376473 0.0000431117 0.0000038560 0.0002880775 0.0000504410 0.0981654556 -0.0330730996 -0.0109195248 0.0063602394 0.0533304595 0.0907218857 0.0143538005 0.0698257533 0.0815563806 -0.1144176656 0.0289828884 0.0210764506 -0.0013380107 -0.0774359469 -0.0985448755 -0.0219068205 -0.0896143378 -0.0896321374 -0.1026047595 0.0941085541 0.0130472323 0.1156606565 0.0277199457 -0.0018201023 -0.0397325239 0.0158998314 -0.0015472468 0.1766387826 -0.0561743031 -0.0586584187 -0.1051979316 -0.0327219035 -0.0348511299 -0.0187137977 -0.0021977767 0.1195402463 -0.0230626203 -0.0098297755 0.1201197774 0.1085759106 0.0346159239 0.0471157368 0.0306829636 -0.0516809573 -0.1088115119 0.0405152300 -0.0495163732 -0.1124479679 -0.0153834253 0.2888682256 0.0183635173 -0.1992047246 0.1461587337 -0.0424421102 0.0035892751 0.1359194245 -0.0567445990 -0.2442293052 0.1236346866 -0.1447249371 -0.0445697753 0.2801207921 -0.1116410687 0.0639077496 0.0091379644 0.0407767302 0.0311078246 -0.0447730966 -0.0537920376 -0.0630623176 -0.0441665154 0.0465963247 0.0031834509 -0.0766755704 -0.0487433350 -0.0181169842 -0.0262754245 -0.0206056307 0.0085775301 0.0449775169 0.0272888472 -0.0363020093 -0.0278934009 0.0394360208 -0.0376941059 -0.0202648463 -0.0228394801 -0.0287091772 0.0075075466 0.1330630791 -0.0721238815 0.0635736386 -0.0154149112 0.0170455124 0.0108664948 -0.0401771912 0.0521620805 -0.0082384162 0.0242716324 -0.0294121471 0.0012355126 -0.0706162464 0.0673776093 0.0179121919 0.0556804762 -0.0499632843 0.0551268223 0.0124996847 0.0529431199 -0.0338892339 -0.0190535082 0.0219365917 -0.0105554250 -0.0487468967 -0.0713376534 -0.0128435677 -0.0062358577 0.1186397514 -0.0316435550 -0.0561456991 -0.1060222162 0.0171090496 -0.0060875560 -0.0121045186 0.0011000033 0.0529597281 0.0585828593 -0.0230740899 0.0032502522 -0.1205705461 0.0571876296 0.1220323307 0.0723171103 0.0518121141 0.0132121848 -0.0007635609 -0.0006900802 0.0000447747 -0.0018089814 -0.0003155664 -0.0000908897 0.0002625689 0.0011458576 0.0003196550 -0.0026297031 -0.0014376605 -0.0002056005 0.0010927652 0.0006401977 -0.0005111397 -0.0027691914 0.0000319472 0.0020518369 0.0065818662 -0.0026882601 0.0009894935 -0.0021638722 0.0013127095 -0.0007972761 0.0016002893 0.0037233773 0.0011292640 0.0013740698 0.0030084690 -0.0067716213 0.0016855785 0.0047950560 -0.0019302472 -0.0047047105 0.0043068906 0.0016846055 -0.0065185562 0.0012263828 -0.0035153342 -0.0052767558 -0.0016983525 -0.0000705344 -0.0005318792 -0.0026385953 -0.0043532299 -0.0005675080 -0.0045847589 0.0028836585 0.0001297244 -0.0039039286 0.0008673885 -0.0044577603 -0.0016177997 0.0064753822 -0.0047341562 0.0055948324 -0.0017173415 -0.0046454598 -0.0087145985 -0.0007882523 0.0021321500 0.0002706858 0.0008459827 0.0027596062 0.0011444594 -0.0004271597 0.0009477685 0.0038074175 -0.0001615658 0.2243477432 -0.1192483661 0.2662048909 -0.1247002162 0.0615267436 -0.2164198868 -0.0253716642 0.0085332977 -0.0582756336 0.1061538360 -0.0582413773 0.1586408036 0.0325290380 -0.0260594051 0.0585884562 0.0662097126 -0.0250626191 0.1020556547 -0.0051805247 0.0079459845 -0.0054140370 -0.1351150044 0.0714470711 -0.2085359790 0.1442854666 -0.0856493292 0.2438462137 -0.1592767797 0.0966184556 -0.2468911544 -0.3406162931 0.1950252187 -0.5119061536 -0.0453260180 0.0253441705 -0.0554297475 0.0065707142 0.0000949451 0.0147035731 0.0003878299 0.0071702662 0.0116983205 0.0024170049 -0.0034932584 0.0013896438 -0.0071349059 0.0074313765 -0.0076139843 0.0031480622 0.0013944500 -0.0112009672 -0.0033371824 -0.0059886427 0.0031341804 -0.0071357381 -0.0057008497 -0.0052016478 0.0037648934 0.0021388332 -0.0143662461 0.0329059899 -0.0077724001 0.0709849334 0.0073824069 -0.0090273992 0.0284866146 0.0290080630 -0.0186578829 0.0563032793 0.0478415200 -0.0245953221 0.0909709155 0.0348255315 -0.0069279121 0.0935314115 0.0205131311 -0.0071179993 0.0346165112 0.0279797225 -0.1001189143 0.0103539792 -0.0029283847 0.0053127758 -0.0016030331 0.0031966765 -0.0026535098 0.0148785102 -0.0091500791 0.0183163070 -0.0185046889 0.0059518569 -0.0041940226 0.0009708150 -0.0002640714 -0.0009827700 0.0106411371 -0.0051569015 0.0017213590 0.0035337096 -0.0067266168 0.0043005323 -0.0132343452 0.0064554472 -0.0054158069 -0.0055167577 -0.0007894877 -0.0039321404 0.0043838255 0.0009439014 -0.0033171180 -0.0011649988 -0.0071612883 0.0174565641 -0.0081670808 -0.0051049692 0.0114114755 -0.0089459428 0.0163498022 -0.0155213165 0.0002376460 0.0213464623 0.0225910891 -0.0243376661 0.0013700034 -0.0130643878 0.0065440515 0.0173844031 0.0200940006 -0.0327615376 -0.0095549225 -0.0250361664 -0.0221211012 -0.0056440838 0.0144052701 0.0145272142 -0.0105755975 -0.0142599412 -0.0133581291 0.0039413362 -0.0078680808 -0.0063641904 0.0015638803 0.0041509987 -0.0004905803 0.0014688608 -0.0022181399 -0.0015121771 0.0022957130 -0.0027873219 0.0008188588 0.0017002617 0.0020316266 0.0029252705 0.0023883433 0.0036278088 0.0021444417 -0.0047394506 -0.0010161684 0.0022346279 -0.0004280049 -0.0044403251 -0.0020092934 -0.0013314062 -0.0041488081 -0.0024765471 -0.0044995492 0.0036220491 -0.0006586422 0.0074569229 -0.0043137636 0.0006574747 -0.0015103090 0.0051157867 -0.0032616088 0.0115399554 0.0089420115 -0.0110170987 0.0021708963 0.0099442363 -0.0118064208 0.0020476725 -0.0009055577 -0.0000862918 0.0006198453 0.0026995419 -0.0015268903 0.0013589754 -0.0046303208 0.0011794510 0.0001928173 0.0019423408 0.0013318649 0.0020077099 0.0002565803 0.0005756222 0.0076010364 -0.0106504493 0.0029801377 0.0005315346 0.0040005763 -0.0012872630 -0.0030460650 -0.0009944494 -0.0009016565 -0.0027778205 0.0029583009 0.0011953109 0.0085254686 -0.0111045497 0.0042351472 0.0020257797 -0.0003277200 0.0030269568 0.0011108035 -0.0034464997 -0.0012915525 0.0021847769 -0.0000808090 -0.0009949330 -0.0007308601 0.0017213143 0.0014494624 0.0000971506 0.0012611605 -0.0019182285 0.0013564988 0.0005407295 0.0036798929 -0.0006311848 0.0026551795 -0.0016556055 -0.0034500028 -0.0012867020 -0.0021381279 0.0044596267 0.0083553272 0.0128824858 -0.0012920208 0.0052832341 0.0126027083 0.0034672131 -0.0054020192 -0.0013026020 0.0035452626 -0.0017390055 0.0002493395 0.0058240432 -0.0034664097 0.0045918334 0.0099696646 0.0087940699 0.0110328396 0.0045773264 -0.0001203060 -0.0029715801 -0.0007936422 -0.0010276620 0.0017448841 -0.0001535991 0.0068967136 0.0019181361 0.0010789376 0.0013940754 0.0010283119 0.0107927257 0.0033994777 -0.0017604835 0.0194432359 -0.0107487784 -0.0050450083 -0.0011309677 -0.0027233513 0.0029855905 -0.0037208438 0.0009805184 0.0009244571 0.0165291432 -0.0110654179 -0.0060004730 0.0149080166 -0.0065417131 -0.0105426234 -0.0039810731 -0.0026260258 0.0046341924 0.0118402083 0.0154865001 -0.0099609735 -0.0041730691 -0.0009093767 -0.0037176511 -0.0179028119 -0.0132373802 -0.0003368595 0.0002675903 0.0023278018 -0.0041571636 0.0171079401 -0.0036163229 -0.0177818914 0.0004000159 -0.0027650005 -0.0094586219 -0.0183288984 0.0086011331 -0.0067365844 0.0000859892 -0.0378471754 -0.0645400077 -0.0127600822 0.0611701846 0.0788613149 -0.0097704188 0.0259683449 -0.0073310514 0.0265960403 -0.0924920785 -0.0086067264 0.0723979007 -0.0005182601 0.0949048698 0.1328736056 -0.0814917506 -0.0390088330 -0.0499332497 -0.0080385287 0.0875191960 0.0314346744 0.0617375938 -0.0476781984 -0.0578758087 0.0611544641 0.0191665620 -0.0128620937 0.1103779616 0.0101014651 0.0163563776 -0.0107238069 0.0820384233 0.0313769292 0.0508901755 0.0050646972 -0.0294432802 -0.0195978212 -0.0247890126 -0.0105362843 -0.0094270910 0.0213205877 -0.0121331711 0.0233615823 -0.0310759821 -0.0197965128 0.0113184764 -0.0160546599 -0.0568427263 0.0421645614 -0.0988082438 0.0053850880 -0.0009507888 0.0142115923 -0.0035257694 0.0032503001 -0.0091313004 0.0034839952 -0.0010353767 0.0131242063 0.0071939610 -0.0067485853 0.0115677534 0.0098315173 -0.0046173901 0.0099592768 -0.0104534475 0.0069308398 -0.0163542217 -0.0374145171 0.0149192058 -0.0579837298 -0.0675336576 0.0343346199 -0.1144544657 -0.0465460595 0.0311943094 -0.0736013595 0.0059204800 -0.0031538453 0.0032739184 -0.0007605322 -0.0014131904 -0.0022843095 0.0035137390 -0.0053109394 0.0037995113 -0.0032106113 0.0014469137 -0.0073472083 0.0028742622 -0.0024175547 0.0048863158 0.0003197395 -0.0002906856 0.0052956247 0.0036285864 0.0009367820 0.0043713648 0.0009838491 0.0017822491 -0.0007012329 -0.0026947860 0.0001078779 0.0009928071 -0.0036957933 0.0008681337 -0.0060637787 -0.0013717815 0.0038542138 -0.0068209778 -0.0127956000 0.0068489661 -0.0240976991 -0.0139196696 0.0065467517 -0.0258733159 -0.0071862760 0.0016303781 -0.0211539905 0.0072606833 -0.0053094669 0.0070741007 -0.0009408646 -0.0039503467 -0.0642147761 -0.0240907411 0.0450741859 -0.0158592549 0.0013114318 -0.0016726672 0.0002192003 -0.0010236940 0.0004578034 -0.0014208243 -0.0014766746 -0.0010724480 0.0007213148 -0.0011439527 0.0022232001 -0.0043554075 0.0025900506 -0.0046984374 -0.0024784941 0.0004474234 -0.0025346008 0.0081551976 -0.0007950399 0.0039132717 -0.0003960064 0.0011747099 -0.0003192184 0.0000328102 0.0000031932 0.0009332854 0.0004450826 0.0141018477 -0.0124745216 0.0063622831 -0.0022087198 0.0026742743 0.0032400543 0.0007895068 0.0002848708 0.0006663798 -0.0087771339 -0.0089634408 0.0090538470 -0.0001026278 -0.0010935388 0.0043963596 -0.0021508038 -0.0083076416 0.0138436736 -0.0000831876 0.0082028446 0.0137281769 0.0010050196 -0.0004338597 0.0055027072 0.0016248283 -0.0083109512 -0.0051023502 -0.0005754751 0.0006907253 0.0001592179 -0.0003834801 -0.0007136190 -0.0005507005 -0.0003415213 0.0011132580 0.0006146704 -0.0459156375 -0.0020531814 0.0166578613 -0.0052753829 -0.0123817701 -0.0465811850 -0.0127395547 -0.0266930281 -0.0406175584 0.0599858288 0.0142418124 -0.0317932377 -0.0043818710 0.0464615079 0.0445459655 0.0107009482 0.0545643974 0.0307694552 0.0200665412 -0.0686819271 0.0228374542 -0.0928202852 -0.0854867329 0.0704825651 0.0102385949 -0.0722691337 0.0406057826 -0.1305707183 -0.0580420392 0.1040186447 0.0188135176 -0.0220199444 0.0565097807 0.0282269036 -0.0301340380 0.0075270008 0.0079932668 0.0069961596 0.0038296735 0.0220416270 -0.0558208000 0.0175020003 -0.0073378109 -0.0089988250 0.0032882048 0.0141448201 -0.0432365044 0.0029866239 -0.0316091804 0.1039595132 -0.0361053884 -0.0772723830 0.2137623109 -0.0414059409 -0.0330639131 0.1014108661 -0.0592907949 -0.1316751179 0.2200259474 -0.0620413681 -0.0719445644 0.1002947541 -0.0498292715 -0.0254312198 0.0127276511 -0.0339204547 -0.0089070655 0.0409701988 0.0149834032 0.0107101411 -0.0315849572 0.0144133406 0.0114935959 -0.0302597825 0.0163136281 0.0062416776 0.0257897171 0.0387399231 -0.0195367594 -0.0503304476 -0.0782421252 0.0171574504 0.0064406742 -0.0020315514 0.0336863317 0.0285722839 0.0581348235 -0.0319883489 -0.1172905943 -0.3154700537 0.0030496709 -0.1089783734 -0.2112401524 -0.0089255417 0.0220636523 0.0541738390 -0.0302513287 0.0080300925 -0.0176616412 -0.0112506358 0.0003216851 -0.0024406253 -0.0864340452 -0.0988429933 -0.2479814547 -0.1209778608 0.0377571163 0.0678314712 0.0881761920 -0.0095925482 -0.0769569953 0.0194716924 -0.0937935290 -0.0410933472 -0.0730080459 -0.0049580883 0.0154857463 0.0942045169 -0.1368898437 -0.0940097165 -0.1885492319 0.0991471844 0.0067654124 -0.0196254586 0.0714604587 -0.0175891052 0.0859242780 -0.0328979697 -0.0140887893 -0.2846986137 0.1842263312 0.0936596573 -0.0477566935 0.0085296209 0.0647120739 0.0012927740 0.0005619086 0.0000827437 -0.0007977845 0.0011624462 -0.0002711686 0.0033643733 0.0045288991 0.0003422600 -0.0013087195 0.0004019314 0.0004393216 0.0001252882 -0.0010011967 0.0007984903 0.0010430396 -0.0013893300 -0.0000137239 -0.0027741201 0.0028734876 0.0029612348 -0.0027712479 0.0029480195 -0.0036499786 0.0057045535 0.0096560477 0.0140137939 -0.0113464355 0.0170914422 -0.0248880691 -0.0009026814 0.0211920946 -0.0110239248 -0.0112984569 -0.0104354905 0.0109855316 -0.0063523048 -0.0104150525 -0.0190575375 -0.0163172169 -0.0075612011 0.0034511037 -0.0217310048 -0.0115211533 0.0128905514 0.0104362982 0.0046682462 -0.0064287413 -0.0108002886 0.0041538217 0.0087190606 -0.1485473495 0.1196641839 0.1183407749 -0.0014933619 0.0058377675 -0.0003967225 -0.0075863163 -0.0065729199 0.0062825975 0.0047132140 -0.0010486020 0.0003675419 0.0026638679 0.0031889339 -0.0020947701 -0.0003721527 -0.0010764369 0.0024564482 -0.0139947580 0.0073732956 -0.0171778270 -0.0115983943 0.0062454930 -0.0197494086 0.0029939387 -0.0022032082 0.0045418410 -0.0050358388 0.0030530380 -0.0075982682 -0.0000230093 -0.0003942297 0.0005960915 0.0000714879 0.0001767281 -0.0001318358 0.0022382153 -0.0010247535 0.0033158703 0.0020152794 -0.0009796766 0.0031904602 -0.0144344688 0.0078509525 -0.0232231203 -0.0137700149 0.0076414650 -0.0217238196 -0.0015102584 0.0011565440 -0.0023230285 0.0030000202 -0.0017751436 0.0034832708 -0.0007606201 -0.0001406062 -0.0012187544 0.0007916608 -0.0016762228 0.0014076697 -0.0007086743 0.0003701980 -0.0014277165 0.0008765531 -0.0006460585 0.0014662164 0.0001443794 -0.0002040725 0.0015651945 0.0006663338 0.0003847480 0.0005818976 0.0004011441 0.0005181394 0.0001601725 -0.0002401853 -0.0001507518 0.0009464108 -0.0027340273 0.0007293166 -0.0059770794 -0.0007263279 0.0007524078 -0.0025899737 -0.0040186534 0.0020708792 -0.0075853697 -0.0052440856 0.0023901924 -0.0110461706 -0.0038257329 0.0008887250 -0.0096714167 -0.0007226679 0.0002409606 -0.0004548762 0.0005320625 0.0001042978 0.0115889293 0.0006605316 0.0130408745 -0.0019133770 -0.0000985318 -0.0000237805 -0.0005862011 0.0004977901 -0.0006506801 0.0006314015 -0.0006348925 0.0001810802 0.0002038123 0.0004884132 -0.0005999005 -0.0014252880 0.0004230643 0.0003880812 -0.0007512383 0.0002962141 -0.0008200841 0.0013090438 -0.0018381140 0.0011317543 0.0014418012 0.0003705174 0.0001872193 -0.0002131574 -0.0000613600 0.0002143006 0.0000633277 0.0002177647 -0.0023422264 0.0010972433 0.0003314339 -0.0013706932 0.0016334353 -0.0044285649 0.0045910629 0.0001510537 -0.0012056391 -0.0016436847 0.0037595218 0.0000211291 -0.0003347916 0.0009906373 -0.0008620801 -0.0010425373 0.0018196731 0.0025068854 0.0062170901 0.0051990012 0.0016042092 -0.0045599768 -0.0044084196 0.0031547334 0.0041334949 0.0039060443 -0.0003088438 0.0004842421 0.0003837413 -0.0002312143 -0.0005603402 -0.0002684333 -0.0001776963 0.0004259944 0.0001363109 -0.0020386972 -0.0045313303 0.0038287066 -0.0009769589 0.0030394875 -0.0029588335 -0.0026031146 0.0005920056 0.0005281619 0.0010142265 0.0053478235 -0.0034277778 0.0023482942 -0.0016971723 -0.0012441043 0.0026324534 0.0006358855 -0.0038304329 -0.0053011798 -0.0009201789 -0.0001530218 -0.0081129512 -0.0108695980 0.0118288097 -0.0018465563 -0.0089620014 0.0054121934 -0.0005956736 -0.0175122042 0.0132921705 -0.0009203394 -0.0089275764 0.0034753608 0.0132139592 -0.0052110257 -0.0103613487 0.0111402982 0.0036607205 -0.0089213570 -0.0052293334 -0.0138610004 0.0005420651 -0.0051790392 0.0002014754 0.0109136843 -0.0003123853 -0.0062692154 0.0076262743 -0.0058582878 0.0123634804 -0.0157480086 0.0084059458 0.0459005479 -0.0012248758 -0.0090385958 0.0136288327 -0.0109875664 -0.0142268718 0.0400955885 -0.0013769943 -0.0179386847 0.0053694257 -0.0081580344 0.0008614409 0.0023246488 -0.0019940276 0.0001848507 0.0025002934 -0.0020788168 0.0075285935 -0.0050837004 -0.0015439056 0.0029132596 -0.0010916982 0.0081533122 0.0011755107 0.0098051599 -0.0075859184 0.0029378384 -0.0044255548 0.0125435297 0.0049427078 0.0172234862 -0.0071345759 -0.0057596960 -0.0018927785 -0.0043746180 0.0224213292 0.0263840089 0.0158515436 0.0029001165 -0.0031817998 0.0186943750 0.0096232838 -0.0206201485 0.0009511272 0.0066668393 -0.0034427139 0.0027390539 0.0170873106 -0.0190789228 0.0092985088 0.0225620599 0.0201630212 0.0087611509 0.0189096075 -0.0132061095 -0.0089455122 0.0717898347 -0.0379550686 -0.0478115268 -0.0375737460 0.0162301787 0.0249816580 -0.0558868492 0.0317258035 0.0380533998 0.3342660080 -0.1576932184 -0.1936552596 0.4197722680 -0.1993758850 -0.2626614155 -0.0638526225 0.0338958469 0.0369739906 -0.0307794813 0.0170380124 0.0127795535 0.2372974213 -0.1291297946 -0.1593382960 0.4494384793 -0.2345343370 -0.2983310701 0.0001516274 0.0000306043 -0.0000822365 -0.0004902232 -0.0004467018 0.0002931314 0.0003667610 0.0004273027 0.0002605739 0.0003605116 0.0004101875 0.0001576740 -0.0000481759 -0.0000453175 0.0002056969 -0.0013316681 -0.0000789536 0.0011044854 0.0005795087 -0.0001117165 0.0005919362 0.0000983517 0.0000613906 0.0000240883 0.0203536284 0.0274201078 0.0309818964 -0.0108901189 -0.0047379972 -0.1781949000 0.0092073964 0.0536750959 -0.0205569978 -0.0157355099 -0.0345790839 0.0170012835 -0.0128416796 -0.0412531192 -0.0655140446 0.0125541339 -0.0363105687 -0.0102934390 -0.0116817718 -0.0384390581 0.0164279588 0.0067813880 0.0298958774 -0.0255197136 -0.0189361373 0.0122018358 -0.0067974660 0.0317603565 0.0125611607 -0.0463049024 -0.0066324752 0.0098729191 0.0313655106 -0.0286704489 -0.0034784856 0.0328686035 0.0092918576 -0.0078679810 -0.0070834087 0.0097280709 0.0091016173 -0.0025369236 -0.0070297415 0.0029517440 -0.0016558809 -0.0518263053 0.0275040046 -0.0595141902 -0.0974336219 0.0584213382 -0.1668336484 0.0169535434 -0.0110958737 0.0274169195 -0.0211971784 0.0141789135 -0.0339530343 0.0046538139 -0.0042440236 0.0122675202 0.0064202129 -0.0030576506 0.0094428459 0.0171152960 -0.0071989760 0.0234666078 -0.0025079913 0.0020657595 -0.0044071389 -0.0852702340 0.0432315154 -0.1383131201 -0.1166368759 0.0637689266 -0.1882429192 -0.0559259506 0.0363975711 -0.0857660501 0.0126602662 -0.0075181149 0.0145606809 -0.0032892040 -0.0016064148 -0.0045343782 0.0040701979 -0.0086415320 0.0076734566 -0.0043328099 0.0021373048 -0.0091492311 0.0044138533 -0.0033591153 0.0075833167 0.0008314200 -0.0009347953 0.0077634528 0.0039811574 0.0018608389 0.0041471705 0.0016963814 0.0027760928 -0.0000599012 -0.0019354181 -0.0006229360 0.0035400812 -0.0101475067 0.0024861152 -0.0222571587 -0.0021952541 0.0047059082 -0.0099863671 -0.0183113855 0.0094791229 -0.0377102091 -0.0243336369 0.0109700696 -0.0500972638 -0.0169770073 0.0035520638 -0.0427956586 0.0008069086 -0.0017905490 0.0031645530 0.0031231553 -0.0081445797 0.0263100464 0.0008046445 0.0249400390 -0.0018803197 -0.0007402703 0.0003260195 -0.0033169977 0.0025215406 -0.0037313231 0.0044381578 -0.0025866146 0.0018369202 0.0021009401 0.0043983211 -0.0050436847 -0.0117058821 0.0000544442 0.0040922384 -0.0032689738 0.0073390971 -0.0051270853 0.0105590023 -0.0153529839 0.0084705062 0.0101712927 0.0005200660 0.0006600058 -0.0010509703 -0.0004020105 0.0010043364 0.0003549450 -0.0033758727 -0.0041241829 0.0015676364 0.0021856131 -0.0066675440 0.0028102617 -0.0208114571 0.0185203571 -0.0025039641 -0.0230525530 -0.0231178314 0.0419873520 -0.0028679146 0.0127160999 -0.0238076649 -0.0194477912 -0.0111326800 0.0228626225 0.0218018868 0.0527891520 0.0463420292 0.0134003934 -0.0391006265 -0.0378491598 0.0255200605 0.0276963475 0.0280338623 -0.0007169386 0.0019305291 0.0016181220 -0.0008080560 -0.0012948250 -0.0003578594 -0.0000002849 0.0012036565 -0.0001629919 -0.0099766229 -0.0017025370 0.0045455080 -0.0085468414 -0.0027055598 -0.0139282189 -0.0129453282 -0.0061917617 -0.0105373409 0.0139315554 0.0030048220 -0.0052435293 0.0054182809 0.0062811362 0.0087055877 0.0061469906 0.0073353416 0.0051447232 -0.0013978233 -0.0029504562 -0.0119518144 -0.0321745541 -0.0041063294 0.0083132143 0.0040501064 -0.0124537952 0.0056253171 -0.0152811249 -0.0126697437 0.0202862570 0.0121862144 -0.0113563237 0.0071664288 0.0164263694 -0.0078220481 -0.0160269780 0.0128039749 0.0059266718 -0.0194273421 -0.0097595137 -0.0267049455 -0.0014675712 -0.0046458761 0.0058090532 0.0235591280 -0.0000627192 -0.0059734777 0.0216389888 -0.0037688326 -0.0031898183 -0.0169790185 0.0124559800 0.0583367600 -0.0064815901 -0.0165897175 0.0161523678 -0.0154604444 -0.0048845703 0.0690288025 0.0029275991 -0.0188004137 -0.0028976151 0.0025447860 -0.0055687647 0.0001875071 -0.0084446253 -0.0035267776 0.0080130420 0.0040713075 0.0156450526 -0.0061510508 -0.0038243801 0.0028145060 0.0013878838 0.0162536354 0.0065296585 0.0249383814 0.0139913048 0.0151380695 0.0135316328 0.0809409193 -0.0015359037 0.0079366147 -0.0570486251 -0.0212616357 -0.0251835246 -0.0614991933 0.0850825122 0.1755541981 0.3641959696 0.0758795785 0.1604056685 0.4663471580 0.0059789241 -0.0512654589 -0.0444305113 0.0024730601 -0.0153653383 -0.0260615544 0.0773103618 0.0344723552 0.1928968976 0.1063685195 0.1842190152 0.4225951264 -0.0203876094 0.0009179816 0.0141410544 -0.0031106939 0.0130476813 -0.0019144430 0.0097859158 -0.0183727449 -0.0079200592 0.0037888415 -0.0038419762 -0.0045998870 -0.0473495164 0.0057210679 0.0225819851 -0.1001834678 0.0548676487 0.0473542619 0.0093692766 0.0061976297 -0.0118698486 0.0160242736 -0.0066512697 -0.0040447894 -0.0762206030 0.0466315030 0.0317862711 -0.0908341548 0.0390737471 0.0626441602 -0.0003182044 -0.0001200339 0.0000206727 -0.0022704273 -0.0020447442 0.0015401137 0.0003608623 0.0008734391 0.0024077557 0.0021993476 0.0024458642 0.0014395160 0.0005713206 -0.0001372603 0.0005808940 -0.0052961122 -0.0014833107 0.0041488884 0.0031508267 -0.0002525301 0.0022699424 0.0029475403 0.0004154051 -0.0007571984 0.0038205810 0.0005644063 -0.0060457347 -0.0174260390 -0.0136143836 -0.0894793233 -0.0004116866 0.0184006541 -0.0029984374 -0.0043283989 -0.0230804373 -0.0018372194 0.0002492292 -0.0103649527 0.0008031267 0.0155432589 -0.0173315287 -0.0059263630 -0.0083187893 -0.0140105059 0.0146504925 0.0041464517 0.0196414626 -0.0164793770 -0.0130332850 0.0125270885 -0.0015711921 -0.0084529636 0.0275969933 -0.0098149659 0.0004991965 0.0023361258 0.0204787867 -0.0080246397 -0.0051451963 0.0016485160 0.0018914189 -0.0016813738 -0.0023634545 0.0025357312 0.0025894196 0.0004650546 -0.0052837824 0.0033535475 -0.0000002604 0.0869999334 -0.0476949577 0.0959928937 0.2080120656 -0.1210021932 0.3530972258 -0.0353005964 0.0237871381 -0.0556522900 0.0419581067 -0.0276312499 0.0655629779 -0.0125771058 0.0102212523 -0.0246522451 -0.0138868748 0.0063147822 -0.0206549270 -0.0341808054 0.0158941919 -0.0501592101 0.0079937468 -0.0042039429 0.0140332643 0.1716753456 -0.0864155413 0.2843604688 0.2450640187 -0.1344877017 0.3977812007 0.1288608971 -0.0789759148 0.1945942050 -0.0231058019 0.0120992072 -0.0273183682 0.0069272144 0.0030935109 0.0080255876 -0.0040570783 0.0133363224 -0.0083738592 0.0073339669 -0.0036183952 0.0151701335 -0.0075195409 0.0058172895 -0.0125618769 -0.0014513390 0.0016350487 -0.0129635260 -0.0066976844 -0.0033924558 -0.0067053720 -0.0028483215 -0.0048477093 0.0002734885 0.0028863172 0.0011904594 -0.0060107197 0.0173375223 -0.0042211370 0.0386032406 0.0032354494 -0.0083768559 0.0161344153 0.0309219693 -0.0163638454 0.0618137117 0.0407877999 -0.0186199742 0.0847964024 0.0287614036 -0.0055849621 0.0720307102 0.0002184075 0.0013374666 -0.0087038258 -0.0035124208 0.0142850516 -0.0282724013 0.0048114503 0.0031529965 0.0016070421 0.0011767579 -0.0003982004 0.0067749340 -0.0049702831 0.0070637305 -0.0092377786 0.0067761849 -0.0071993536 -0.0063364429 -0.0163503597 0.0232535395 0.0267047997 0.0005344320 -0.0289227806 0.0155880411 -0.0220142215 0.0191014527 -0.0174231937 0.0487161371 -0.0229606145 -0.0341170976 -0.0006173195 -0.0008446948 0.0019935093 0.0010037642 -0.0024999050 -0.0010610566 0.0404076030 0.0061801882 -0.0010856164 -0.0198391122 0.0507842559 -0.0174389511 0.1071999172 -0.0872891245 0.0226121843 0.0618776044 0.0648036546 -0.1384533200 0.0109509175 -0.0537217526 0.0663722077 0.0533414074 -0.0042060988 -0.0187217982 -0.0697337028 -0.1599337613 -0.1333577525 -0.0421252289 0.1261057642 0.1271337765 -0.0805307856 -0.1010264573 -0.0981125204 0.0003804627 -0.0035597387 -0.0030258458 0.0019045574 0.0018605052 0.0006035509 -0.0005432778 -0.0026630192 0.0007953207 0.0011336968 0.0104882308 -0.0078954010 -0.0029382291 -0.0064675345 -0.0002722613 -0.0012203959 -0.0015056608 -0.0071695076 0.0040278302 -0.0095299170 0.0049756016 -0.0005236772 0.0075341692 0.0043346488 -0.0017529752 0.0017610848 0.0093317138 0.0034696933 -0.0066558069 0.0019672941 -0.0025961704 0.0145054925 -0.0136857164 0.0033837800 0.0049527991 -0.0042618781 -0.0066967249 0.0217427767 -0.0117462630 0.0021730488 -0.0003799599 0.0067139775 0.0073094321 -0.0035642573 -0.0072218127 0.0074983023 -0.0020534109 -0.0063185490 -0.0064023767 -0.0067145621 -0.0015065923 -0.0033121755 0.0006607667 0.0091953201 -0.0029897413 -0.0025656326 0.0081782520 -0.0173669276 0.0289008838 -0.0174606061 0.0014182783 0.0355315905 -0.0037033848 -0.0054326551 0.0115010947 -0.0076772373 0.0029719991 0.0214412726 0.0018598507 -0.0197402723 0.0129705425 -0.0053542205 -0.0034417733 -0.0021659609 -0.0008309938 -0.0014898085 0.0002310495 0.0042253828 0.0044267412 -0.0038088022 -0.0009934517 0.0025971831 -0.0015199132 0.0055268301 0.0058594857 0.0221044257 0.0301995255 0.0022056386 -0.0023713360 0.0087242359 -0.0014074892 -0.0005773005 -0.0345216992 -0.0056996976 -0.0071546874 -0.0125733057 0.0325195103 0.0565421486 0.1091794575 0.0370769167 0.0718436255 0.2163928243 0.0021996584 -0.0138396388 -0.0090522371 -0.0027350329 -0.0122695036 -0.0258204141 0.0402195565 0.0380728115 0.1328937944 0.0406589370 0.0728214640 0.1774002738 -0.0213206313 0.0039674181 0.0151364375 0.0169196982 -0.0037027920 -0.0139947213 0.0032628020 -0.0157404118 -0.0047277804 -0.0111567375 0.0030937175 0.0045894346 0.0267382462 -0.0305005009 -0.0248494015 -0.0194405964 0.0144270903 -0.0025926726 -0.0045967381 0.0105121625 -0.0019299278 0.0131278942 -0.0043823434 -0.0047818707 -0.0444573353 0.0290183294 0.0176100146 -0.0031962995 -0.0019953448 0.0041998890 0.0005706769 0.0001302578 -0.0001560180 0.0043250376 0.0033513567 -0.0028130737 -0.0012701548 -0.0027502104 -0.0049733562 -0.0039509120 -0.0049671303 -0.0030724281 -0.0016997910 0.0007138558 -0.0013548510 0.0089841943 0.0053512927 -0.0070172131 -0.0022161935 -0.0023944341 -0.0044384515 -0.0105399488 -0.0010118277 0.0032387560 0.0171456868 0.0209808026 0.0332746232 0.0328860218 0.0443883768 0.0324306094 0.0126214319 0.0245096027 -0.0198571354 -0.0004569487 -0.0056558855 0.0195061847 0.0013217649 -0.0210490638 -0.0502211164 0.0101334290 -0.0043437804 0.0009960018 0.0051976869 -0.0061600478 0.0094486171 0.0044634917 0.0142114435 -0.0091417891 -0.0063175563 0.0079786731 -0.0004782958 0.0284475777 0.0003300018 -0.0234817413 0.0036634369 -0.0075979459 0.0058426417 -0.0113100071 0.0184854780 0.0333274397 -0.0003774021 -0.0087113323 -0.0079278469 -0.0003178093 0.0026615710 0.0024297875 -0.0070030343 0.0039827855 -0.0053202109 0.0951861908 -0.0496176523 0.1051130529 0.1327712556 -0.0763657307 0.2253868260 -0.0243348357 0.0167043207 -0.0380407990 0.0318510663 -0.0215102108 0.0505610159 -0.0062842586 0.0063931968 -0.0138296785 -0.0071258777 0.0025880453 -0.0106684672 -0.0244037610 0.0093101979 -0.0325677096 0.0006570945 -0.0008571723 0.0016104696 0.1166048370 -0.0596020540 0.1914397814 0.1574701825 -0.0867060255 0.2509137141 0.0704304129 -0.0468652067 0.1094256697 -0.0175781640 0.0122644737 -0.0249340999 0.0029394620 0.0006197426 0.0051679357 -0.0200079942 0.0227879614 -0.0376486541 0.0075930191 -0.0033977333 0.0169509064 -0.0068948948 0.0039100259 -0.0145659400 -0.0033500972 0.0019393692 -0.0133014709 -0.0052239528 -0.0019171865 -0.0059947459 -0.0017331310 -0.0029767708 -0.0000096409 0.0007483009 0.0010863645 -0.0063979407 0.0186809714 -0.0053530962 0.0435758615 0.0026939776 -0.0045412079 0.0118245549 0.0292931560 -0.0121354987 0.0670694549 0.0432611167 -0.0173131043 0.0955655810 0.0336703996 -0.0087201828 0.0795393358 0.0028576088 0.0013151422 -0.0047917241 -0.0017093707 0.0069128475 -0.0316382350 0.0048457681 -0.0084453741 0.0026523746 0.0023263217 -0.0009528455 0.0089666614 -0.0012880427 0.0119271547 -0.0032381154 -0.0058093894 0.0108966890 0.0125710144 0.0325845651 -0.0481824724 -0.0407597624 -0.0032934784 0.0625313518 -0.0285578241 0.0298676971 -0.0369063414 0.0189148781 -0.0905255257 0.0372524842 0.0652254893 0.0009451133 -0.0029246146 0.0005207634 -0.0003337012 -0.0004053517 0.0003859252 -0.0961845588 0.0029113216 -0.0051961880 0.0435638385 -0.1074903151 0.0309538993 -0.2174375869 0.1737671413 -0.0472017424 -0.0861219474 -0.0945765038 0.2416742095 -0.0183883132 0.0758209651 -0.0924160727 -0.0691340053 0.0445428460 -0.0210107064 0.1303056070 0.2870603682 0.2290544287 0.0770740392 -0.2359329413 -0.2455750948 0.1483488516 0.2034119308 0.1929211430 0.0057241215 -0.0045949119 -0.0028913398 -0.0013346418 0.0001161989 -0.0022450454 0.0030897641 -0.0003224117 -0.0034590764 -0.0241424043 -0.0298942331 0.0289717432 -0.0039368463 0.0083596610 -0.0243202972 -0.0139391074 -0.0080777028 -0.0041430314 0.0211721447 0.0346132179 -0.0288066076 0.0060069631 0.0011412541 0.0094202652 0.0132938246 0.0167750588 -0.0111061227 -0.0037557146 0.0018710389 -0.0176451155 -0.0556639933 -0.0653023127 0.0666089797 -0.0066732529 -0.0559056648 0.0328896229 -0.0359888783 -0.0898426704 0.0845468589 0.0106739125 -0.0202921709 0.0067928319 -0.0016248450 0.0026790554 -0.0004790991 0.0007264167 -0.0030112196 0.0010004800 -0.0023331194 0.0052376513 -0.0014098252 0.0001886542 -0.0015412778 -0.0001424344 -0.0020998889 0.0023231226 -0.0008593485 -0.0068783259 0.0136036886 -0.0039057446 0.0014650247 -0.0055226639 0.0012765908 0.0011160554 -0.0013038802 0.0010342261 0.0070249500 -0.0110874082 0.0024037452 -0.0069370062 0.0104382115 -0.0037477812 -0.0024888981 0.0136447628 -0.0162134425 -0.0005177426 0.0203504888 -0.0052900116 -0.0010970415 0.0003741335 -0.0005011749 0.0002720740 0.0001191235 -0.0007396888 -0.0050822817 -0.0189185096 -0.0432038441 0.0044027918 0.0046211314 0.0404312265 0.0043616197 0.0093664601 0.0223324277 -0.0011863520 -0.0012253958 -0.0172047153 -0.0007158956 0.0137036351 0.0325052902 -0.0112485981 -0.0295951881 -0.0837046380 -0.0001148803 -0.0154139917 -0.0096006830 0.0018613792 0.0148886716 0.0279010866 -0.0137251416 -0.0531273490 -0.1083868038 -0.0061488778 -0.0049621234 -0.0482126100 0.0028487033 -0.0079104294 0.0001593912 -0.0069405659 0.0106911223 0.0014912168 -0.0069672853 -0.0128369214 0.0005005133 0.0013334456 -0.0048581843 -0.0050916859 -0.0301754697 -0.0053572032 0.0094531054 -0.0145059402 0.0107603217 -0.0088786685 0.0030011233 0.0073155548 -0.0087777711 -0.0009190602 0.0019910030 0.0030274590 0.0018505408 0.0035281191 -0.0171958411 -0.0127529650 0.0011091746 0.0087951372 -0.0015218460 -0.0030460479 0.0017271605 0.0019708565 0.0085821809 -0.0074225022 -0.0003012171 0.0015420917 -0.0079386148 -0.0190929458 -0.0155017598 -0.0039517027 0.0019363607 0.0010238139 0.0007452431 0.0160785930 -0.0091619502 -0.0124229524 -0.0053350803 -0.0033432433 -0.0131482034 -0.0075082999 0.0042302374 -0.0013615010 -0.0332928789 -0.0459448205 -0.0796148586 -0.0739691341 -0.0990250893 -0.1159456316 -0.0251901585 -0.0403048583 0.0392517937 0.0006635898 -0.0031165351 -0.0440675041 0.0028389633 0.0417079753 0.1131187662 -0.0017191280 -0.0007854613 -0.0071219287 -0.0144633205 0.0091616900 -0.0074465542 -0.0070983968 -0.0138382773 0.0064287670 0.0006574445 -0.0028821690 0.0021677908 -0.0646270174 0.0194355496 0.0394328780 -0.0049457543 0.0148765489 0.0038045756 0.0205779954 -0.0407791396 -0.0706722803 0.0014748916 0.0171727589 0.0131158185 -0.0012550466 -0.0053126274 -0.0043911556 0.0083384656 -0.0042216768 0.0112309512 0.0305964455 -0.0150268589 0.0321822965 0.0204264872 -0.0155848481 0.0365661111 -0.0034047047 0.0012376529 -0.0069270411 0.0052358052 -0.0042244129 0.0096270265 -0.0000653768 0.0003394408 -0.0043814990 -0.0008588204 0.0003673993 -0.0012775822 -0.0054293222 0.0006907288 -0.0043872284 0.0007727121 -0.0004969962 0.0002342536 0.0217771114 -0.0107397256 0.0322712881 0.0245439871 -0.0134822475 0.0388494021 0.0076482301 -0.0084834417 0.0147474749 -0.0038405258 0.0040955823 -0.0054558312 -0.0014539006 0.0006172022 0.0000494814 -0.0139035237 0.0125673987 -0.0223857411 0.0050853348 -0.0018767567 0.0120626480 -0.0035705510 0.0019181037 -0.0079871655 -0.0022928419 0.0005845319 -0.0068558691 -0.0036842065 -0.0000074893 -0.0055373502 -0.0004056417 -0.0009864106 0.0007199047 0.0011628918 -0.0001250429 -0.0012586532 0.0044203700 -0.0016409980 0.0105575065 0.0016563055 0.0011874807 0.0061414311 0.0194324184 -0.0082908139 0.0338306924 0.0193805033 -0.0076522474 0.0424892964 0.0134925828 -0.0043611856 0.0345003889 -0.0018184634 0.0029504238 -0.0011907838 -0.0001543997 0.0006825155 0.0053359373 -0.0020011219 0.0064808268 -0.0017270182 0.0006370016 0.0000334563 0.0020491560 0.0014711179 0.0041351226 0.0020815104 -0.0058640747 0.0104444358 0.0100902078 0.0283871739 -0.0412319194 -0.0322832264 -0.0051516494 0.0549689906 -0.0224746859 0.0275847833 -0.0296612227 0.0111324150 -0.0756019335 0.0295648266 0.0548484992 -0.0000408757 -0.0014012434 -0.0003389953 -0.0007072992 0.0007041012 0.0008022862 -0.0891443936 0.0125169022 -0.0098839402 0.0363185054 -0.0886250871 0.0223674556 -0.1766844130 0.1401903743 -0.0406381978 -0.0748697036 -0.0805317912 0.2061815416 -0.0180476183 0.0807598890 -0.0881032478 -0.0636262798 0.0443846308 -0.0250138768 0.1097232533 0.2377364943 0.1868497585 0.0642111335 -0.1977059325 -0.2084453162 0.1239290652 0.1726855928 0.1633577882 0.0037437039 -0.0015179999 -0.0004896092 -0.0014669919 0.0002225240 -0.0009333628 0.0023227579 0.0006267783 -0.0025304542 0.0438892716 0.0601245361 -0.0564169671 0.0085033301 -0.0234588981 0.0451021867 0.0261162167 0.0082841487 0.0051969275 -0.0353489576 -0.0683992107 0.0540516755 -0.0148159848 0.0016978367 -0.0101979887 -0.0248913586 -0.0268148097 0.0294438514 0.0247079226 0.0046744207 0.0204244295 0.1086038635 0.1421032034 -0.1452315251 0.0152989918 0.1255449729 -0.0746829392 0.0577279836 0.1888465887 -0.1693289279 -0.0099934287 0.0563961426 -0.0191241215 0.0043924457 -0.0027579227 -0.0010890015 0.0028915521 0.0020999528 -0.0017192840 0.0009493448 -0.0072411026 0.0012970303 -0.0016054854 -0.0001995905 0.0022737183 0.0008578912 -0.0047659549 0.0026133582 -0.0013001702 0.0030983809 -0.0027760879 -0.0021840012 0.0207842584 -0.0027438926 -0.0036699776 0.0097169487 -0.0059514667 -0.0105662536 0.0235352912 -0.0047882889 -0.0069113660 0.0060776031 -0.0026878978 0.0015615957 -0.0308544904 0.0338076566 -0.0002228697 -0.0428949348 0.0149720501 0.0018714385 -0.0029924552 0.0007999227 0.0011535838 -0.0024834492 0.0023427714 0.0149451889 0.0527107170 0.1153268422 -0.0107102362 -0.0161228578 -0.0900286176 -0.0097832933 -0.0235426531 -0.0654673660 0.0031995822 0.0019401818 0.0348024220 0.0113730604 -0.0126058820 -0.0364448226 0.0444909733 0.0965025770 0.2798149011 -0.0002433809 0.0283770315 0.0197990042 -0.0093734883 -0.0368070962 -0.0764476840 0.0525869364 0.1373684497 0.3087129617 0.0262557651 0.0430567011 0.1828807952 -0.0255680894 0.0204537995 0.0133645631 0.0319500424 -0.0282373083 -0.0175356653 0.0154143230 0.0108575462 -0.0049919707 -0.0151183122 0.0129916306 0.0153318919 0.0940987660 -0.0227829363 -0.0480438178 0.0205337062 -0.0131740397 0.0082870782 -0.0117146478 -0.0047254397 0.0171333351 0.0139547994 -0.0075770479 -0.0106929293 -0.0424009447 0.0189109816 0.0515493968 0.0320200292 -0.0072645866 -0.0198372220 -0.0017912902 -0.0024215405 0.0010100493 -0.0018504336 0.0025798029 -0.0028512929 -0.0005159397 0.0010525857 -0.0025483939 -0.0098553049 -0.0074204140 -0.0010209480 0.0024724038 0.0004365972 0.0006307574 0.0052090711 -0.0070740977 -0.0037241931 0.0001537831 -0.0031038021 -0.0073934020 0.0001744023 0.0019180133 -0.0008728259 -0.0184928696 -0.0537136220 -0.0585263437 0.0286963634 -0.1404258333 -0.0889068120 0.0047515778 -0.0849644696 0.0422271250 0.0465652592 0.0446477679 -0.0688161977 0.0549076813 0.0441936698 0.0366221346 -0.0023011025 0.0823082104 0.0252359042 0.0254051644 0.0984097460 -0.0361161971 -0.0161590947 -0.0638201544 0.0524467644 0.0521170928 -0.0174258388 0.0068953784 -0.0769836007 -0.0304999898 0.0875580679 0.0134380111 -0.0311015934 -0.0589895044 0.0619277500 0.0950533732 0.0208068832 -0.0265725254 -0.0199538093 -0.0106847428 -0.0242740842 -0.0169538669 0.0148076113 0.0052006043 0.0029542962 -0.0178850275 0.0073089907 -0.0025044500 0.0150839418 -0.0124847777 0.0104894330 -0.0210644456 0.0006461434 0.0009495648 0.0030934045 0.0001867185 -0.0000891192 0.0005789358 0.0020792031 -0.0001415812 0.0035755870 0.0009361224 -0.0014961337 0.0014169201 0.0015088705 -0.0015028879 0.0020629798 -0.0038755749 0.0007834438 -0.0053976034 -0.0069253541 0.0014396765 -0.0130835019 -0.0108047754 0.0052890011 -0.0222099952 -0.0125836919 0.0063860872 -0.0192867898 -0.0004856259 0.0015765693 -0.0017833189 0.0010997154 -0.0013111676 0.0014330723 0.0016900182 -0.0014636337 -0.0014321134 -0.0026593551 0.0007729584 -0.0063148992 0.0013685220 -0.0010177376 0.0025841971 0.0008882544 0.0001136134 0.0020535006 0.0022695923 -0.0002821993 0.0037591839 -0.0000672326 0.0003190959 -0.0009206511 -0.0011390203 0.0004334979 -0.0012850081 0.0030512757 -0.0006551066 0.0068650520 -0.0005164088 -0.0010427167 -0.0022381851 -0.0095214217 0.0048545823 -0.0090594325 -0.0032584852 0.0017141883 -0.0064596353 -0.0005953739 0.0004735448 -0.0046887730 0.0025104792 -0.0015941948 0.0034318981 -0.0037289109 0.0053500010 -0.0579609107 -0.0113853273 -0.0345578827 -0.0017771931 0.0009276662 -0.0011729084 0.0004767477 -0.0010127210 0.0002686331 -0.0010646021 -0.0006219458 -0.0002533199 -0.0005302744 -0.0010766361 0.0002082415 0.0034354664 0.0021826436 0.0016734132 -0.0030564415 -0.0012254546 -0.0017071498 -0.0019420958 0.0027202219 -0.0007270966 -0.0021316548 0.0004166060 -0.0003292386 0.0001108768 0.0000929005 0.0003988099 0.0002348059 0.0005040429 -0.0068027222 0.0037053500 0.0037448871 -0.0093912574 0.0055895422 -0.0128535011 0.0077590740 -0.0051958288 0.0014322323 0.0005334560 -0.0003052475 0.0012556412 -0.0027057231 0.0122404261 0.0052095136 0.0072450251 -0.0111122542 -0.0046794956 -0.0085218671 -0.0051556266 -0.0020032302 0.0064690302 0.0089075935 -0.0046105651 -0.0073844482 -0.0067129755 -0.0002080260 0.0001051440 -0.0001492430 0.0000234348 0.0000180932 -0.0000571921 -0.0001672766 0.0002962919 0.0004235184 -0.0528263079 -0.0872762890 0.0812617392 0.0223013194 0.0378043805 -0.0285417716 0.0050315816 -0.0154907235 0.0123725234 0.0329017983 0.0920954888 -0.0798662274 -0.0135857806 -0.0031177252 0.0189505430 0.0138249449 0.0453741395 -0.0254800944 0.0230583725 0.0211683567 -0.0093444228 -0.0590876021 -0.2089168194 0.1723734822 -0.0223223636 -0.1408499580 0.0900039745 -0.1035082036 -0.1884836449 0.1702450499 0.0130135731 0.0398808001 -0.0221515875 -0.0344410887 0.0056840011 0.0420310041 -0.0371025792 -0.0104477598 0.0456232916 0.0335852253 0.0383251439 0.0097490271 0.0096787545 -0.0139013588 -0.0549164179 0.0063565968 0.0015436840 -0.0469764113 0.0054644480 0.0042613641 0.0417994378 -0.0641505157 -0.0808344583 -0.0033827123 0.0278515975 -0.0081539905 0.0189322391 -0.0329657360 -0.0857687129 -0.0281788752 0.0359420625 0.0177410682 -0.0116075214 0.0002549863 0.0406813119 -0.0300277562 0.0083510699 0.0463508054 -0.0193695592 -0.0312027798 0.0063579805 0.0150248416 -0.0039405453 -0.0115998300 -0.0322728247 0.0160917291 -0.0087822630 0.1263141358 -0.0074478706 0.0134829465 -0.0370465963 -0.0242602506 -0.0969633893 -0.0425318132 0.0279175618 0.0009854825 -0.0126921964 -0.0578894811 -0.0087811990 0.1783105655 0.0905883426 0.1818974152 0.4132564400 -0.0515381886 0.0658231748 -0.0190990451 -0.0612742386 -0.0009077131 -0.0747574972 0.0181658102 0.1868295715 0.2937002638 -0.0461417761 0.0697290482 0.3727481161 0.0182858803 0.0131838959 -0.0183710802 0.0072712479 -0.0291482014 0.0047264570 -0.0026742902 0.0275087977 0.0013033537 -0.0077773345 0.0022358668 0.0019011431 0.0605064016 0.0066906325 -0.0225892323 0.0805051007 -0.0558905673 -0.0283523847 -0.0083243918 -0.0189976522 0.0226915313 -0.0130966866 0.0052621788 -0.0013407309 0.0632091917 -0.0441672184 0.0037548224 0.0839386033 -0.0138786428 -0.0566721578 0.0014861811 0.0011472877 -0.0001963409 0.0011237978 0.0016145418 -0.0004204901 0.0023624088 0.0026549643 -0.0001016137 0.0006049321 0.0010069182 -0.0001598958 -0.0005025902 -0.0012076182 0.0004705056 0.0031841796 -0.0001457846 -0.0018084903 -0.0076689184 0.0056835973 0.0024320341 0.0018738805 0.0005954739 -0.0025326518 0.0053677787 -0.0017794793 0.0170718546 0.0096899494 -0.0197780115 -0.0010477954 0.0041287040 -0.0165773319 0.0046982217 0.0187097536 -0.0048528472 -0.0052291239 0.0135684176 -0.0157908136 -0.0159731790 0.0236981009 0.0083583142 -0.0036476582 0.0142254696 0.0102929930 0.0094491731 0.0010403399 0.0207583075 -0.0088115085 -0.0107789383 0.0190910387 0.0071639061 -0.0120086868 0.0271274137 -0.0046715353 0.0009968598 -0.0116444554 0.0053780790 0.0027414271 0.0246811229 0.0170185471 -0.0053571536 -0.0052320632 -0.0052445055 -0.0011951975 -0.0020798711 0.0032373380 -0.0035690869 0.0029203883 -0.0070029189 -0.0524338663 0.0350891645 -0.0614428599 -0.0261322476 0.0136487597 -0.0374510465 0.0017245052 0.0005064459 0.0048289080 -0.0025359528 -0.0011732535 -0.0016050576 0.0119832514 -0.0022785224 -0.0017710579 -0.0002603724 -0.0080018063 0.0030801277 -0.0045155153 -0.0083313330 0.0047882370 0.0009982170 0.0036578884 -0.0104253031 -0.0032500154 -0.0031622324 -0.0319117360 -0.0195205218 0.0034534510 -0.0496084535 -0.0262623624 0.0024340349 -0.0275803828 0.0044952052 0.0044978186 0.0171150905 -0.0183315212 0.0145054044 -0.0156745889 -0.0324588871 0.0268975185 -0.0209279380 0.0368996700 -0.0146036700 0.0823554083 -0.0237363555 0.0136697532 -0.0468068030 -0.0093291399 0.0061978248 -0.0413313975 -0.0218889307 -0.0037433532 -0.0338929463 -0.0026501987 -0.0112663736 0.0085054033 0.0091864497 0.0004405246 -0.0072096208 0.0193764588 -0.0023486601 0.0386571539 -0.0013358676 -0.0073426857 0.0113181371 0.0907976617 -0.0414145198 0.1917097288 0.1130543979 -0.0502557206 0.2414257837 0.0787780942 -0.0191468110 0.1934672317 0.0047703090 0.0019978597 0.0021562892 0.0039945023 0.0029810601 0.0002880520 0.0282538811 -0.0601601730 0.0170579971 -0.0011685649 0.0006429645 -0.0022124954 -0.0011276279 -0.0021712161 -0.0051491711 0.0069608460 -0.0109599694 0.0137848632 -0.0148648241 0.0384186045 -0.0628659650 -0.0046732189 -0.0993166990 -0.0024942997 0.0421065959 0.0176290993 0.1066006651 -0.0154696247 0.0402697556 -0.0185585366 -0.0020368056 0.0008660304 0.0009007247 -0.0007513241 0.0005474338 0.0011822849 0.2604311130 -0.1236184083 0.0688828760 -0.1382934887 0.2519379784 -0.0188886692 0.2300922279 -0.1201650758 0.0913832450 -0.1379968038 -0.1156981081 0.0493546004 -0.0101614750 0.0293285456 -0.2430968909 -0.1641643434 -0.2646547475 0.3964366103 0.0080962070 0.1117898047 0.1756764891 0.0161594138 -0.0290164485 0.0374134337 0.0291682821 -0.1245957248 -0.0799943432 0.0008779636 0.0010313330 0.0013473648 -0.0011013845 0.0018378286 0.0010828484 -0.0017039004 0.0024806098 0.0019660201 0.0046248994 0.0168396795 -0.0137406563 -0.0083191860 -0.0105654130 -0.0051022853 -0.0082461207 -0.0022955939 -0.0121302848 0.0038093859 -0.0192577669 0.0135864531 0.0010999151 0.0116940095 0.0058404167 -0.0006503196 0.0020926421 0.0107415920 -0.0071293334 -0.0212514816 0.0065334577 -0.0124046031 0.0317575515 -0.0242778378 0.0081826283 0.0219120117 -0.0160127283 -0.0057539996 0.0296074149 -0.0140567781 -0.0021917478 -0.0170436116 0.0205316987 -0.0175845857 0.0193540281 0.0014084435 -0.0014349611 -0.0160400769 0.0106620397 -0.0182147449 0.0635601309 -0.0130784048 0.0059095634 -0.0120994712 -0.0120610431 -0.0084346404 0.0206346836 -0.0162978904 -0.0277332174 0.0483359739 -0.0078128173 0.0300603990 -0.1106587904 0.0228750479 0.0266578746 -0.0662436080 0.0389049807 0.0464355192 -0.1322730921 0.0242078750 -0.0096208475 0.0371834204 -0.0131478105 -0.0046805039 -0.0079671449 0.0006178355 -0.0032270288 -0.0038065363 0.0080151190 -0.0130677957 0.0187210277 -0.0082783379 -0.0043705961 0.0173722740 -0.0162276577 -0.0013083297 -0.0100713985 -0.0068057728 0.0047712181 0.0149720128 0.0098168731 -0.0061945945 -0.0107219398 0.0072388694 -0.0035014192 -0.0051504626 -0.0061269647 -0.0090842638 0.0020246169 0.0400301058 -0.0050414751 0.0089442774 0.0088378766 -0.0105900827 0.0170973822 -0.0100997508 -0.0042076549 0.0039213753 0.0058129044 -0.0307726836 0.0123461000 -0.0264124329 -0.0136314297 -0.0083739979 0.0153959292 -0.0324540390 0.0067550005 0.0287738627 0.0319206764 -0.0177527621 -0.0213603671 -0.0017304535 -0.0250451955 -0.0023376390 -0.0195296857 0.0095925221 0.0100176671 0.0638386556 -0.0660157850 -0.0593327084 0.0102709766 0.0033693128 -0.0236595671 -0.0105415712 0.0099167081 -0.0023891607 0.0135596404 -0.0027207791 -0.0168170084 -0.0658056113 0.0419069063 0.0366010467 0.0064327761 -0.0070484468 -0.0144233048 0.0014835377 0.0019988884 -0.0009181983 -0.0010593411 -0.0031461973 0.0032744130 0.0005624207 -0.0010434990 0.0043170641 0.0083663411 0.0080308623 0.0023579127 -0.0023182764 0.0031618935 -0.0013694983 -0.0066113820 0.0046626757 0.0018009512 0.0131519429 -0.0046468426 0.0073369406 0.0009655034 0.0056542794 -0.0055653002 0.0110968620 0.0087016228 0.0241572832 0.0140410126 -0.0164568656 -0.0426294909 0.0091425521 -0.0011547132 -0.0042730837 0.0120931156 -0.0105575560 -0.0004987319 0.0030507749 -0.0226794575 -0.0254538087 0.0640387455 -0.0018723938 -0.0180821359 0.0281434912 0.0049776012 0.0266617857 0.0011350669 0.0654211285 -0.0409212606 -0.0475936779 0.0547249722 0.0145108675 0.0051661105 0.0517831757 -0.0652351970 0.0041674795 -0.0207039238 0.0361206424 -0.0101230926 0.0139240756 0.0184773333 -0.0051903412 -0.0011321558 -0.0074560446 0.0021481069 0.0007703007 0.0028374819 -0.0086332005 0.0061446864 -0.0093439942 0.0508554867 -0.0330669721 0.0659146987 -0.0135217671 0.0200949780 -0.0321293966 0.0009680906 0.0014307413 0.0048120773 0.0018188616 0.0036301969 -0.0033769307 -0.0064116679 0.0017869069 0.0099657770 0.0012857239 0.0041589037 0.0007921466 0.0125098145 0.0058602099 0.0035721987 -0.0074993333 0.0000505044 -0.0026526807 -0.0216116859 0.0135581934 -0.0130114490 -0.0267381362 0.0189176829 -0.0319665177 -0.0119693801 0.0264743508 -0.0314922519 -0.0039303293 -0.0041460288 -0.0147962391 0.0160141337 -0.0147069348 0.0149815298 0.0294308295 -0.0263363967 0.0201185652 -0.0350089666 0.0141060325 -0.0780487496 0.0224421967 -0.0135374862 0.0439218038 0.0085412927 -0.0055655235 0.0386883851 0.0216951975 0.0038559882 0.0331651884 0.0027962909 0.0112116548 -0.0082743578 -0.0096927955 -0.0005518151 0.0063299167 -0.0157976185 0.0012945374 -0.0327413904 0.0003665133 0.0090582349 -0.0140317625 -0.0850179763 0.0392390433 -0.1830511145 -0.1057689610 0.0468885921 -0.2235484140 -0.0733244402 0.0169815942 -0.1800576246 -0.0001693185 -0.0071190764 0.0016812465 -0.0054884464 -0.0102511197 -0.0284518751 0.0775571855 -0.1515029450 0.0452614013 0.0003309600 0.0000588228 0.0032583307 0.0010604959 0.0027108037 0.0047213634 -0.0036452617 0.0066399737 -0.0092571741 0.0093359317 -0.0244526552 0.0384673420 0.0028425285 0.0620789365 0.0030383991 -0.0279856325 -0.0108615948 -0.0672203344 0.0098546997 -0.0258215336 0.0134116011 0.0010727867 -0.0009114357 -0.0007509949 0.0005539717 -0.0011392706 -0.0014405904 -0.1669435639 0.0826227556 -0.0459464257 0.0881813107 -0.1588372683 0.0090521133 -0.1423873989 0.0717977247 -0.0574914512 0.0884447139 0.0745925930 -0.0352997616 0.0068161458 -0.0220131720 0.1580711012 0.1069755187 0.1672430799 -0.2513677794 -0.0046355614 -0.0719682950 -0.1151227184 -0.0106366814 0.0196065854 -0.0254046857 -0.0188271157 0.0850709417 0.0550688270 -0.0003844422 -0.0017581155 -0.0017412199 0.0010734090 -0.0009455640 -0.0009000554 0.0021133791 -0.0029658463 -0.0027917277 0.0040458550 0.0182381311 -0.0147976709 -0.0104786479 -0.0109307046 -0.0046514929 -0.0094975844 -0.0021103828 -0.0125742088 0.0058590602 -0.0184104327 0.0125526213 0.0023391276 0.0108833699 0.0057006785 -0.0014716478 0.0002886288 0.0105705357 -0.0049451836 -0.0110032409 -0.0031589318 -0.0142793086 0.0375125676 -0.0269459174 0.0100432184 0.0170495746 -0.0126478031 -0.0040997662 0.0302789240 -0.0155337255 0.0000782066 -0.0169356940 0.0165861304 -0.0363883068 0.0489539711 -0.0073825798 0.0065740686 -0.0362346353 0.0135334849 -0.0589487561 0.1579770270 -0.0384136123 0.0140610195 -0.0268103363 -0.0140911600 -0.0224562838 0.0541653147 -0.0280558863 -0.0677379973 0.1179289106 -0.0293333497 0.1034088301 -0.2808407209 0.0629051144 0.0631877932 -0.1785797323 0.0995889610 0.1365099309 -0.3224512359 0.0734482032 -0.0357641194 0.0987290970 -0.0298611326 -0.0057736411 -0.0085895174 -0.0022682813 -0.0043171408 -0.0013655387 0.0093591074 -0.0252919628 0.0491965680 -0.0277098953 -0.0117532524 0.0509563058 -0.0333093161 0.0012392058 -0.0013440264 0.0050625475 0.0012727838 0.0048402056 -0.0011723783 -0.0059875959 -0.0069356178 0.0025966605 -0.0047118989 -0.0018269408 0.0003880757 -0.0092543444 -0.0041550557 0.0102334116 -0.0067174370 0.0083608817 0.0085106324 -0.0047016982 0.0091253426 -0.0044462950 -0.0018004488 0.0006712134 -0.0007919713 -0.0156047271 0.0125391047 0.0038253019 -0.0035190515 -0.0004150357 0.0094307028 -0.0697908271 0.0078206748 0.0649824603 0.0640919534 -0.0345226428 -0.0446978415 -0.0046057169 -0.0613430168 -0.0042234058 -0.0382715553 0.0224745681 0.0209263636 0.1193466056 -0.1472261450 -0.1280469588 0.0086327154 0.0215027327 -0.0472685493 -0.0205513972 0.0211069888 -0.0065776576 0.0314076311 -0.0051696631 -0.0361451933 -0.1487196356 0.0952959330 0.0841354426 -0.0012040520 -0.0085236434 -0.0203902144 -0.0013422886 -0.0009248776 0.0013033107 0.0060569942 0.0055264742 -0.0041161301 -0.0024049714 -0.0017389986 -0.0038365572 -0.0054065578 -0.0069449154 -0.0024502849 0.0007512565 -0.0022563428 0.0007298827 0.0080202504 -0.0053024268 -0.0052647503 -0.0151731756 0.0075686582 -0.0051072810 0.0052998329 -0.0044815295 0.0025215283 0.0018485458 -0.0076005194 0.0092717869 0.0012374638 -0.0151556449 0.0213109145 -0.0001379922 -0.0193351699 0.0084622163 0.0177742848 -0.0050552976 -0.0056465520 0.0162239674 -0.0103838639 -0.0048629359 -0.0091592813 0.0125366639 0.0097946006 0.0009643088 0.0084309577 0.0014207865 0.0012525135 -0.0066202101 0.0093397769 0.0155988082 -0.0086559969 -0.0031980500 -0.0132507349 0.0077579606 0.0275276137 0.0061785273 -0.0086675073 -0.0141122650 0.0064240003 0.0244427745 0.0105810198 -0.0044104729 -0.0033874892 -0.0027750772 -0.0050973857 -0.0038228790 0.0027037027 -0.0013070470 0.0004151961 -0.0014831477 0.2192597143 -0.1326089593 0.2436695368 0.0528844149 -0.0168008363 0.0740487737 -0.0077769805 0.0057009857 -0.0102870017 0.0162480610 -0.0027670757 0.0166449991 -0.0228832750 0.0061586051 0.0092540375 0.0005562413 0.0139004800 -0.0042499277 0.0121153632 0.0181306550 -0.0118197649 -0.0076138721 -0.0024516149 0.0095499334 0.0097351379 0.0025373848 0.0714400298 0.0387014501 -0.0083931697 0.0960227751 0.0398872332 0.0100445857 0.0309381651 -0.0235454746 -0.0015533328 -0.0522701477 0.0361418360 -0.0334479506 0.0404303971 0.0385426481 -0.0329352061 0.0034050242 -0.0721350992 0.0290641278 -0.1608683753 0.0424512561 -0.0269241334 0.0831686070 0.0153720448 -0.0097021035 0.0710510498 0.0482927740 0.0056147058 0.0772381944 0.0041761580 0.0227532126 -0.0195064218 -0.0235428709 0.0001317321 0.0026804586 -0.0031358931 -0.0066668486 -0.0017305900 -0.0071163121 0.0144327936 -0.0467417031 -0.1668316295 0.0785642012 -0.3515758953 -0.1823796608 0.0820691643 -0.3771752446 -0.1237001081 0.0259974803 -0.3054435391 -0.0032986767 -0.0097273894 -0.0044607246 -0.0103694732 -0.0116948571 -0.0340966504 -0.0109915908 0.0149253895 -0.0059562133 0.0067731406 -0.0041020710 0.0264102736 -0.0074385762 0.0250988056 -0.0059712185 0.0088481977 -0.0129637099 0.0084298675 -0.0035413967 0.0221918796 -0.0420184806 -0.0097568277 -0.0655365888 -0.0030802735 0.0179351156 0.0073464403 0.0654575395 -0.0241391257 0.0272053508 -0.0049107864 -0.0003943926 -0.0064405949 0.0015708527 0.0008790991 -0.0046025625 -0.0036455613 0.1811052886 -0.0782180606 0.0446552274 -0.1068743783 0.1910562954 -0.0175331118 0.1607729856 -0.0789089537 0.0656748091 -0.0731193775 -0.0616259088 0.0373522473 -0.0070818870 -0.0006694837 -0.1317833222 -0.0884666937 -0.1504049243 0.2257745379 0.0251424420 0.1093193932 0.1374896129 0.0220707659 -0.0596453135 -0.0198223990 0.0418862412 -0.0520881415 -0.0245569654 0.0041782941 -0.0125109666 -0.0114880134 0.0026985431 0.0045774588 -0.0019031062 0.0082767617 -0.0088272862 -0.0109326459 0.0076638795 0.0181288807 -0.0159398457 -0.0060828303 -0.0087025580 -0.0019085720 -0.0050646388 0.0004669056 -0.0104755981 0.0007524806 -0.0201864534 0.0147907973 -0.0004552819 0.0100896135 0.0044758754 -0.0028784629 -0.0000064526 0.0099079156 -0.0096684356 -0.0240212744 0.0133232046 -0.0064500941 0.0282386560 -0.0226570522 0.0088311208 0.0247270822 -0.0159609139 -0.0011359284 0.0360918160 -0.0212077038 -0.0048748563 -0.0121528898 0.0172936113 -0.0010200038 -0.0043759152 0.0064398245 -0.0071187141 0.0033577873 0.0048361549 0.0130301482 -0.0161502398 0.0067545843 -0.0007498015 0.0012611719 -0.0062656029 0.0035167379 -0.0069049907 -0.0031674758 0.0115528796 -0.0192590651 0.0111959026 -0.0230408199 0.0218648671 -0.0088139960 -0.0044903160 0.0234033476 -0.0109938142 -0.0232196630 0.0304005127 -0.0141070812 0.0089870368 -0.0103817919 0.0016063495 -0.0033659726 -0.0095569979 0.0013691845 -0.0033227558 -0.0052967811 0.0079792810 -0.0011667616 -0.0056254720 0.0061216984 0.0011302228 -0.0088273454 -0.0002481394 -0.0025442975 -0.0106698721 -0.0136441362 0.0060807407 0.0171362264 0.0135954022 -0.0046682690 -0.0077209372 0.0074151991 -0.0037232892 -0.0066741259 -0.0076188048 -0.0034904848 0.0071366683 0.0455816337 -0.0046806775 0.0049356642 0.0056709526 -0.0102978468 0.0170169357 -0.0106675937 -0.0028967714 0.0037806314 0.0087574506 -0.0325339852 0.0078505273 -0.0394173664 -0.0136594404 -0.0112059988 0.0114893847 0.0038255747 0.0001631822 -0.0033101373 -0.0001219636 0.0019525122 0.0001750612 -0.0024057382 0.0009976595 -0.0002372293 -0.0013292699 -0.0032875279 -0.0021142106 -0.0036668061 0.0034649145 0.0045347820 0.0044355210 -0.0058119391 -0.0064137618 -0.0003262897 0.0023798482 -0.0015250764 -0.0026059643 0.0005784439 0.0023414401 0.0109310451 -0.0057605083 -0.0129774658 0.0088836029 -0.0049816745 -0.0051293370 -0.0038088170 -0.0050599712 0.0055716250 0.0171339200 0.0251527653 -0.0188705937 -0.0031264857 0.0016917335 -0.0180748637 -0.0378104026 -0.0353596678 -0.0105110699 0.0031256952 -0.0000049608 0.0005792973 0.0433266630 -0.0120116234 -0.0328198775 -0.0098021942 0.0003568702 -0.0111055768 -0.0283735530 0.0159922779 -0.0136268053 0.0240725769 -0.0352636690 0.0567177526 0.0285085370 -0.0621567861 0.1130719446 0.0100635954 -0.0874061565 0.0369051675 0.1074300837 -0.0585785282 -0.0347266938 0.0958781215 -0.0780996823 -0.0342590586 -0.0266422528 0.0734871262 0.0642756010 0.0206937823 0.0406045014 0.0354091880 0.0136572948 0.0074027834 0.0257066768 0.0791802699 -0.0279253643 -0.0240581740 -0.0737776932 0.0924964608 0.1297303602 0.0524150788 -0.0739858881 -0.0596583397 0.0229589722 0.1622241579 0.0888774954 -0.0368672566 -0.0292672179 -0.0234914142 -0.0290276467 -0.0117265095 0.0251843507 -0.0078871264 0.0141275272 -0.0368268876 -0.0735751902 0.0463586200 -0.0681766781 -0.0069723279 0.0180162520 -0.0108238207 -0.0036020621 0.0080707163 0.0058051105 0.0020828463 -0.0015482555 -0.0005977285 0.0054173806 0.0032430889 0.0022218488 -0.0006852296 -0.0107261036 0.0022942184 -0.0006501853 -0.0054136676 -0.0020571471 -0.0021467979 0.0031566732 -0.0095434309 0.0048999221 -0.0095187188 -0.0046791911 -0.0020130273 -0.0086189129 -0.0221551990 -0.0094044983 0.0042743874 -0.0128685475 0.0089022932 0.0006793783 0.0122850982 -0.0099625238 0.0074755749 -0.0132709631 -0.0104780978 0.0072427297 -0.0054244341 0.0202215272 -0.0078174409 0.0447263579 -0.0107297697 0.0061166047 -0.0221276061 -0.0053362395 0.0023203221 -0.0170553506 -0.0130551707 0.0004066114 -0.0233366133 0.0001554985 -0.0042943833 0.0054564855 0.0043517773 -0.0004010748 0.0020465485 -0.0056596243 0.0030688085 -0.0112127120 0.0052532312 0.0035566755 0.0177471433 0.0501356367 -0.0220702120 0.0905831992 0.0414114169 -0.0183342643 0.0909338437 0.0301157632 -0.0070867807 0.0743002132 0.0070175128 -0.0057033203 0.0062907827 -0.0061591400 0.0120084340 -0.1015152904 -0.0372696525 0.0409617870 -0.0195756597 -0.0003429184 -0.0014895801 -0.0082579136 0.0018264843 -0.0071985091 0.0005918855 -0.0078100473 0.0061963920 -0.0064003280 0.0069550037 -0.0174755096 0.0336675862 0.0027637369 0.0511978517 0.0013105624 -0.0182213265 -0.0109551790 -0.0556867199 0.0112695164 -0.0218091351 0.0077396004 0.0023300406 0.0020532318 -0.0006176182 -0.0000951022 0.0026231983 0.0018279533 -0.1354466737 0.0699921402 -0.0384910710 0.0739065964 -0.1328441724 0.0062593981 -0.1127964467 0.0476512502 -0.0551969089 0.0598582574 0.0490794031 -0.0187116557 0.0040476864 0.0017741448 0.1237859796 0.0850814949 0.1459131613 -0.2137889341 -0.0087964379 -0.0676940901 -0.0983824605 -0.0109790677 0.0236122339 -0.0110694920 -0.0204509516 0.0566336183 0.0345209963 -0.0024004478 0.0053855025 0.0045407029 -0.0013810998 -0.0035872095 -0.0003499817 -0.0034936234 0.0041267912 0.0050852955 0.0312844379 0.1072978814 -0.0888237692 -0.0460688839 -0.0563067156 -0.0229715650 -0.0401664791 -0.0095284731 -0.0697520143 0.0237690654 -0.1139939661 0.0778902125 0.0011079598 0.0723988978 0.0308513995 -0.0113097289 0.0139078598 0.0611354805 -0.0395770955 -0.1231695717 0.0502847605 -0.0659520573 0.1793272473 -0.1347248779 0.0533093500 0.1096154158 -0.0805679570 -0.0540687035 0.1611556201 -0.0752411698 -0.0340631606 -0.1121594316 0.1383840933 -0.0165831425 -0.0173634984 0.0330439765 -0.0413499539 0.0049862658 0.0297556680 0.0517991041 -0.0399026934 0.0240930491 0.0002459715 0.0001534004 -0.0385288950 0.0135457273 -0.0212388978 -0.0249339260 0.0335586203 -0.0709487182 0.0503548825 -0.1018345542 0.0414077166 -0.0306118760 -0.0032278195 0.0713617600 -0.0265951253 -0.0869766783 0.0676564629 -0.0541002983 0.0434532814 -0.0336094558 0.0030737208 -0.0301399346 -0.0460313605 -0.0046537112 -0.0195461996 -0.0133915641 0.0504861755 -0.0136959035 -0.0147381688 0.0259189698 0.0029144234 -0.0311365309 -0.0120739524 -0.0131861314 -0.0604379182 -0.0840553168 0.0382201880 0.0978016302 0.0950323729 -0.0273751408 -0.0417441724 0.0389682799 -0.0253493590 -0.0400882267 -0.0506023684 -0.0145049672 0.0592883128 0.2972803005 -0.0224173911 0.0349035318 0.0615814429 -0.0591587839 0.0903814261 -0.0624119993 -0.0196052566 0.0248769221 0.0529167034 -0.1873776367 0.0315800183 -0.2422152025 -0.0754957543 -0.0517140360 0.0760593523 -0.0031565847 -0.0043747299 0.0105972200 0.0205015788 0.0094434549 -0.0163355454 -0.0233173389 -0.0343164494 -0.0035545742 -0.0229697671 -0.0158484720 -0.0103321597 -0.0096520336 -0.0481287008 -0.0208157018 0.0095738145 -0.0119568008 -0.0663726736 -0.0076335472 0.0309662667 -0.0216727321 -0.0033705545 0.0028512465 0.0018359480 0.0046735833 0.0079045936 -0.0638292677 0.0379616973 -0.0322821532 -0.0293456910 0.0049917469 0.0034557117 -0.0021729403 -0.0048974360 -0.0047934629 0.0047342587 0.0077445021 0.0073008039 0.0040465394 0.0104427639 0.0114056078 0.0027927806 -0.0021252972 -0.0031501039 0.0020357667 -0.0069411348 0.0023251290 0.0077892720 -0.0152467175 0.0115054490 0.0065811977 0.0093803920 -0.0042603590 0.0009090495 -0.0321093692 -0.0206177319 -0.0433770947 0.0354239177 0.0174505372 0.2700603794 -0.0101778778 -0.0669348772 0.0411642802 0.0115485608 0.0479486866 -0.0502362580 0.0031248377 0.0533015274 0.0424410954 -0.0552602752 -0.0348494454 -0.0514160325 -0.0061616231 -0.0246648911 -0.1323657768 -0.0496330706 -0.0911803429 0.0401791877 -0.0239194846 -0.0366960648 0.0107481684 -0.1995254225 -0.0252156179 0.0965662589 -0.1358296757 0.1420760031 0.0145619335 0.0529789528 0.0333963820 -0.0008720034 0.0488709374 -0.0727400037 -0.0170022837 0.0202398731 0.0135604661 -0.0210128582 0.0078696331 -0.0052011731 0.0250350915 -0.0011892659 0.0002842949 -0.0130120865 0.0108951342 -0.0233134242 0.0215636125 0.0018339702 -0.0066371264 -0.0086416861 -0.0032220506 -0.0017982446 0.0046345506 0.0014297658 -0.0038659716 -0.0039150425 0.0009751465 0.0056315758 -0.0015016088 -0.0100281801 0.0000399176 0.0000011980 0.0024684221 -0.0005871515 0.0033396170 0.0074130908 0.0009329467 0.0089770291 0.0176589202 -0.0040553198 0.0303716087 0.0093381419 -0.0204371153 0.0255994952 -0.0010316022 0.0009357690 0.0015825592 -0.0004965488 0.0023031996 0.0008619459 0.0002098442 0.0014853381 0.0032910454 -0.0008314034 -0.0000857607 -0.0023449660 -0.0001322501 0.0015324378 0.0021010172 0.0023022111 -0.0002481598 0.0005821611 -0.0010775788 -0.0016486741 0.0004109588 -0.0014212959 -0.0021351092 0.0001356780 0.0029538262 -0.0000992465 -0.0005044487 -0.0008606580 0.0012152998 -0.0043563683 -0.0003641058 -0.0022825085 0.0023906272 -0.0014642938 -0.0029477084 -0.0053984128 -0.0016050729 -0.0015695963 -0.0116852970 -0.0042921395 0.0026376598 -0.0071296816 -0.0017512170 0.0073084153 -0.0050886775 0.0107871407 0.0015038460 0.1042720962 0.0043229146 0.0123995379 0.0007089552 -0.0004285611 0.0006480316 -0.0001858758 0.0011176572 0.0003975147 0.0006472267 -0.0009057790 0.0006453553 -0.0012623547 0.0027181822 -0.0022998403 0.0023215846 -0.0020159368 0.0064558647 0.0053587669 -0.0077977133 -0.0003463968 -0.0065848664 0.0002832816 -0.0044783507 0.0038239719 0.0004525204 0.0002984912 -0.0001669753 0.0000222367 -0.0002176334 -0.0001689873 -0.0242266726 0.0241809486 -0.0123970532 0.0094295735 -0.0122918980 -0.0073898874 -0.0034697098 -0.0051902383 -0.0043638134 0.0104293088 0.0125427853 -0.0041026741 0.0007351671 -0.0112323800 0.0291368045 0.0231744984 0.0207101733 -0.0325072347 0.0019330394 -0.0085770602 -0.0191534630 -0.0011717800 0.0007080255 -0.0103147205 -0.0012907336 0.0208660463 0.0144471612 -0.0001789537 0.0002486170 0.0003975212 -0.0001226602 -0.0007784839 -0.0004025818 -0.0000767775 0.0001620663 -0.0000324762 -0.0036580498 -0.0166607692 0.0128849534 0.0146279309 0.0134671367 0.0083827408 0.0172976096 0.0062754617 0.0179101631 -0.0133929406 0.0147645401 -0.0074949090 -0.0019678491 -0.0184337115 -0.0106701711 -0.0008321701 -0.0076988324 -0.0144658231 0.0021177498 0.0074222819 0.0118822713 0.0316213796 -0.0368917150 0.0242158403 -0.0103438862 -0.0066588350 0.0072722776 0.0256848884 -0.0148869047 -0.0047463076 0.0005247626 0.0239227713 -0.0297163750 0.0299104527 -0.0038027084 -0.0258601556 0.0383403794 0.0071360945 -0.0289297232 -0.0213008741 -0.0235736919 -0.0051900435 -0.0050161296 0.0155281135 0.0393792280 -0.0067162966 0.0125930370 0.0268943497 -0.0089747700 0.0292184111 -0.0369858638 0.0513443952 0.0791611517 0.0043640540 -0.0222888795 0.0028273128 -0.0139397293 0.0508321619 0.0089316266 0.0373764263 0.0082473090 -0.0625760875 0.0210523187 0.0079093258 0.0065879293 0.0067989515 0.0044041995 -0.0036928137 -0.0104901602 0.0209201172 -0.0054090795 -0.0130459631 0.0006782153 0.0085021264 0.0229072817 -0.0144400284 -0.0655248369 -0.1035249039 0.0285166886 0.0731902394 0.1142613621 -0.0042646133 -0.0084117302 0.0296274664 -0.0066466154 -0.0187206016 -0.0526113519 0.0054141157 0.0746138728 0.2382915546 -0.0066059496 0.0132844055 -0.0098656274 -0.0177916736 0.0170999057 -0.0364347127 0.0058380614 0.0202569787 0.0579413272 -0.1041789384 -0.0578337331 -0.2437692043 -0.0254675161 -0.0332069943 -0.0131945318 -0.1401093736 0.1201013977 0.0462332298 0.0882792582 -0.1026988864 -0.0480077289 0.0829329072 0.0950006983 -0.0195125976 -0.0292447757 0.0462412806 0.0583983762 0.3827792416 0.0081233226 -0.0977543225 -0.0033873942 -0.0215992349 0.1394758326 0.0016635572 -0.0551731886 0.0635521324 0.0759666959 -0.0419875612 -0.0364007343 -0.2988601610 0.1428494779 0.3335288063 -0.0992811937 0.1038163632 0.0920257407 -0.0004715003 -0.0007010439 0.0001225802 -0.0007247870 -0.0003675305 -0.0002241271 -0.0008339252 -0.0010864688 -0.0008106052 -0.0017216585 -0.0014226658 -0.0000915929 0.0002980922 0.0000544204 -0.0001756840 -0.0015094292 0.0001825195 0.0014186947 0.0023817229 -0.0024204219 -0.0019028568 -0.0020423035 -0.0010795282 0.0019082170 0.0070964265 0.0005696693 0.0050740366 0.0055869348 -0.0009504648 -0.0146627376 0.0053429609 0.0035742470 -0.0030419500 0.0030016614 -0.0025001197 0.0051543615 0.0002428807 -0.0087507334 -0.0053709931 0.0016106396 0.0058046316 0.0021249329 0.0053775655 0.0004986045 0.0045978220 0.0049067461 0.0030162659 0.0043345956 0.0066262799 0.0016278909 0.0024682768 0.0047916367 0.0075509087 0.0113666064 -0.0005581080 -0.0031725819 -0.0033931634 -0.0062134838 -0.0006315745 0.0039647570 -0.0022189284 0.0019990496 -0.0020525709 0.0021252606 0.0012035257 -0.0020659102 -0.0098111134 -0.0018666180 -0.0018859182 0.0180627734 0.1030119974 0.1137649186 -0.0816974005 -0.2336522426 0.0039580927 0.0485544285 -0.0943799085 -0.0627025114 -0.1138823640 -0.0161836487 0.0526854979 0.1590283253 -0.0679371019 -0.1317867525 -0.0004253398 -0.0295506425 -0.0113087299 -0.2117579395 -0.1389676586 0.0921781557 0.0724936049 0.0173329757 -0.0300453598 0.1894765956 -0.1623712031 -0.1376900014 0.1047488544 -0.0791220010 -0.1139327746 -0.2266191288 -0.3360056727 0.0057053396 -0.0557086850 0.1494675359 0.0944595541 -0.0624943372 0.1348858609 0.0808944195 -0.0626619132 0.1406851671 0.0785748914 -0.0364661910 0.0086216571 -0.0816952186 -0.0217236295 0.0720908810 0.0640752612 0.1073373107 0.0018418367 -0.0199023284 -0.0478436449 -0.0889048231 0.0312441090 -0.0714540172 -0.1353297815 0.0076905327 0.1457007983 -0.0042134655 -0.0605295599 0.0776175996 0.0280007092 -0.0070968819 -0.0501425690 -0.0330499128 0.0505639857 -0.0066552117 -0.2049453382 -0.1860261158 0.0759815100 -0.1537210285 -0.2441762350 -0.1014705331 0.0958420270 -0.1283480381 0.0781444888 0.1736024987 0.0090790488 0.0900261720 0.1471359983 0.0961393313 -0.0007502844 0.0010890850 -0.0004888577 -0.0015003690 0.0002974499 -0.0071626312 0.0050639733 -0.0105447523 0.0042823774 -0.0011387537 0.0018857637 0.0006819221 0.0006528105 0.0008689944 -0.0009097033 -0.0007622913 -0.0009259549 -0.0009163167 0.0016935877 -0.0009920193 0.0018977942 -0.0014820424 0.0002383283 -0.0000548398 -0.0001546418 0.0000043847 -0.0005344037 -0.0005099729 0.0027682820 0.0003637028 0.0045222633 -0.0025393395 0.0014615411 -0.0032524493 0.0047123720 -0.0001105253 0.0019118038 0.0002374417 0.0012202946 -0.0016093084 -0.0021139635 0.0085814423 -0.0005909588 0.0012793848 -0.0104297928 -0.0056109338 -0.0009001878 0.0035922005 0.0018305347 0.0043123744 0.0039189913 0.0011993067 -0.0043545230 -0.0040459408 0.0021653448 0.0000687901 0.0006516644 -0.0036950013 0.0063483445 0.0046420397 -0.0005451189 -0.0011057649 0.0007832472 -0.0005260972 0.0046030946 0.0002273777 0.0016917112 0.0024688067 -0.0028813308 -0.0038159059 -0.0048971760 0.0000002394 -0.0032164512 0.0000157333 -0.0050153778 0.0035678232 -0.0026844660 0.0015944280 -0.0006009265 0.0057128194 0.0034553966 -0.0012251425 0.0016195106 0.0019633217 0.0017738844 0.0058207788 -0.0100519553 -0.0070265827 0.0029952592 -0.0028077790 0.0024456303 0.0000785300 -0.0000637819 -0.0071534484 0.0028483350 0.0041035961 -0.0013140081 -0.0048239276 0.0049738012 -0.0025923419 -0.0009573598 0.0021957375 -0.0044505578 -0.0008176086 0.0034101264 0.0040568343 -0.0004004576 0.0017482579 -0.0011337397 -0.0011047187 -0.0054832683 -0.0005362516 -0.0015958168 -0.0037365560 0.0003486607 -0.0038383777 0.0032161848 -0.0088856691 -0.0011741378 -0.0017919913 0.0025796258 0.0049962876 0.0002060364 -0.0072440834 -0.0021882653 -0.0045182040 0.0017531715 -0.0038332955 -0.0021343664 -0.0015572853 -0.0012936948 -0.0024982925 -0.0009567060 0.0018665994 0.0022251444 -0.0033035848 0.0000327516 0.0029832435 0.0009529174 -0.0026964742 -0.0037365361 0.0012433903 0.0018494928 0.0035192075 -0.0005385422 -0.0010742350 -0.0058860280 -0.0023752272 -0.0012346914 0.0010010532 -0.0031254129 -0.0003892341 0.0033706373 -0.0037924167 -0.0061953985 -0.0109403681 -0.0058438410 -0.0001204142 -0.0039726221 -0.0002294016 0.0027763096 -0.0002729709 0.0003964104 -0.0009598630 -0.0020524862 -0.0000079531 0.0067154590 0.0099449854 0.0012298519 0.0007546449 0.0006040778 -0.0013942316 -0.0023931568 0.0043974052 0.0018318163 0.0023743042 -0.0003890461 -0.0027753284 -0.0072440711 0.0008624064 -0.0011146993 -0.0004717261 -0.0003238791 -0.0042104953 -0.0104847691 -0.0054308689 -0.0020975867 0.0019024319 -0.0034310858 -0.0012808377 0.0036452087 -0.0056266341 -0.0014076379 0.0003069997 -0.0041816140 -0.0069905538 0.0052804840 -0.0054578145 -0.0074560734 -0.0033392081 -0.0020995113 -0.0037949029 -0.0010948910 -0.0023087398 -0.0083757382 -0.0165329306 0.0110149977 -0.0055438340 -0.0075348466 0.0080781539 0.0137045673 0.0168180555 0.0075425091 0.0062802684 -0.0025936074 -0.0065067765 -0.0294888663 0.0085047072 0.0232618701 0.0276653709 -0.0091131159 0.0088970449 0.0282855941 -0.0095455796 0.0000062845 -0.0708120461 -0.0216372409 -0.0071875783 -0.1278157130 -0.0450831307 0.0964815637 -0.0797369476 -0.0686734746 0.0395921997 0.0062461351 -0.0148698759 -0.0642132170 0.0572739501 0.0506327574 0.0166360744 0.1429984748 -0.1385492797 -0.0973845725 -0.1572987558 0.0652521091 0.0777099563 0.0026093746 -0.0250936247 -0.0421832244 -0.1193412370 0.0467981822 0.0422740247 0.1208769416 -0.1208405881 -0.1519729690 -0.0406986477 0.0490832187 0.0663305764 0.1066584349 0.1045269040 0.0269267212 -0.0083770550 -0.0527925585 -0.0300637917 -0.0088811077 -0.0085350004 0.0089220346 -0.0101729332 0.0153734278 -0.0249597319 -0.0081087043 0.0133137226 0.0055213337 0.0030458292 0.0054742799 0.0074085652 -0.0035217178 0.0056866407 0.0016485298 0.0000306268 -0.0005139316 0.0033042330 0.0087902362 0.0014747557 -0.0022584179 -0.0030466337 -0.0094667971 -0.0014947144 -0.0050770937 -0.0055385538 -0.0014988092 0.0025173300 0.0014301353 -0.0054048633 0.0086589729 -0.0110359000 -0.0087237707 0.0105452327 -0.0158152744 -0.0034380910 -0.0016437504 -0.0068690846 0.0049690518 -0.0012317888 0.0091221203 0.0040380463 -0.0048107556 0.0044677009 0.0029443064 -0.0096349237 0.0092733270 -0.0074813547 -0.0009628269 0.0005433636 -0.0012411221 -0.0008485572 0.0023415670 0.0016883156 0.0041280418 0.0000425140 -0.0004102950 -0.0021914828 -0.0026593529 -0.0005940916 -0.0027161827 -0.0048558955 -0.0000995353 0.0060097462 -0.0005720492 -0.0016687455 0.0007723303 0.0017727767 -0.0058112812 0.0006682090 -0.0002515251 0.0066526294 0.0023333608 -0.0081428002 -0.0007395380 0.0022010790 -0.0055426200 -0.0115142178 -0.0035086207 0.0026820874 -0.0035613217 0.0048438819 -0.0013407247 0.0027116423 -0.0034178839 0.0123869223 -0.0623602629 0.0044232038 -0.0169938580 0.0056874346 0.0009569697 -0.0025970640 0.0005710577 -0.0002503715 0.0007830288 -0.0014383984 -0.0029178216 -0.0013833655 0.0002298431 0.0037534839 0.0016908162 -0.0009661850 -0.0033844807 -0.0017724256 0.0014224032 -0.0061223301 -0.0015877008 -0.0002426620 -0.0030411988 -0.0017706203 0.0024359774 0.0015704531 -0.0000290802 -0.0001121402 0.0000274136 0.0009233355 0.0005089783 0.0052948253 0.0080415938 -0.0027575518 -0.0066003466 0.0123712605 -0.0066208755 0.0146026745 -0.0125386275 0.0013062204 0.0017441867 0.0034947841 -0.0011860034 -0.0003471173 -0.0061994522 0.0242408086 0.0156319358 0.0105808897 -0.0161159197 0.0049710138 0.0043181625 -0.0030365893 0.0017676279 -0.0085690912 -0.0137532849 0.0045126768 0.0126885890 0.0101979525 -0.0007516926 0.0011426998 0.0007009231 -0.0006233911 -0.0016197198 -0.0009143755 -0.0006935122 0.0016073112 0.0010594734 0.0012502466 0.0134104562 -0.0102507633 0.0184481719 0.0088798419 0.0157248177 0.0321990086 0.0153878624 0.0171151992 -0.0290127232 -0.0206626421 0.0239844342 0.0099493470 -0.0105070543 -0.0317317896 0.0063424723 -0.0055700947 -0.0197745083 -0.0160998707 -0.0589009943 0.0817293142 0.0571103167 -0.0252660654 0.0118627995 -0.0129855489 0.0345975447 -0.0166819693 0.0274891550 -0.0569208036 0.0192818357 -0.0526169818 -0.1065508808 0.0775884545 0.0312204479 -0.0131537070 -0.0097588226 0.0451659951 -0.0123397090 -0.0166158873 -0.0411354374 0.0348892162 -0.0171181344 0.0027083897 0.0040086560 0.0309311065 0.0022027554 0.0054980018 0.0130945122 -0.0869583134 0.2179030270 -0.0855287179 0.0210844147 0.1202954825 -0.0102424420 -0.0069404539 -0.0515886289 0.0127372673 0.0474628006 -0.0127876901 0.0330877415 -0.0421446747 0.0624978912 -0.0182008758 0.0120232355 -0.0001535877 0.0214634936 0.0013295737 -0.0199443199 -0.0131952300 0.0144324993 0.0053326489 -0.0254559295 -0.0029936266 0.0237620562 0.0165223956 -0.0140112222 -0.0052406979 -0.0159554980 0.0141066077 0.0139441448 0.0396691314 0.0222981450 0.0053251699 -0.0149223864 0.0364508297 -0.0035619348 -0.0301481072 0.0434585159 0.0569936723 0.1102412529 0.0747246594 -0.0050241239 0.0787998614 -0.0166823737 0.0036671507 -0.0008531957 -0.0205881253 0.0108821383 0.0150951863 -0.0365589686 -0.0307530832 -0.0970671622 -0.0475493680 -0.0294801928 0.0215450551 0.1080753598 -0.0430287687 -0.0868300178 -0.0676667366 0.0302882350 0.0320883206 0.0202256222 0.0273764236 -0.0116703863 0.0457902852 -0.0213427205 -0.0301995287 -0.3124599254 0.1975163120 0.2103701803 -0.0545271666 0.0256734142 0.0391072464 -0.0186124009 0.0027288350 0.0434210712 -0.0487357533 0.0223403292 0.0684368422 0.3757215452 -0.2154308170 -0.2184135314 0.2391711402 -0.0963437872 -0.1090615117 0.0036446923 0.0018407040 -0.0001818095 0.0017167748 0.0037921342 -0.0015112754 0.0058534246 0.0065458606 -0.0021785775 -0.0015806907 0.0003344531 -0.0002254830 -0.0018576408 -0.0023694602 0.0016204946 0.0054391224 0.0009954264 -0.0020002911 -0.0138264955 0.0080532173 0.0023316197 0.0010067104 0.0016975404 -0.0041396422 -0.0262544775 -0.0207424205 -0.1312320812 0.0394521733 0.1181848597 0.2396057458 0.0005871011 0.0346832503 0.0223560280 -0.0411499667 -0.0912347102 -0.1702288572 -0.0104495749 0.1029329380 0.2035286297 0.0075385235 0.0250206586 0.0708014604 0.0055862416 0.0122362275 0.0270342057 -0.0234162897 0.0377191286 -0.0626689560 0.0075396309 -0.0001813786 -0.0534087172 -0.0890065285 0.0539767566 -0.0637429615 0.1313110476 -0.0992394291 0.0257579260 -0.0186020743 -0.0858661461 -0.0799224459 -0.0401290063 0.0698631356 0.0234536621 -0.0219187903 -0.0160708213 0.0174698394 -0.0007065841 0.0038706665 -0.0095509050 0.0030047500 0.0044574583 0.0219110927 -0.0038282965 0.0111790929 -0.0017961095 -0.0027890505 0.0062244950 0.0062106083 0.0000222526 0.0021024515 -0.0021941069 0.0058985957 0.0028784629 -0.0054780872 -0.0041022517 -0.0100104878 -0.0011021408 0.0034030733 -0.0045166225 0.0000936186 0.0033658184 -0.0008566552 -0.0017014897 0.0114889912 -0.0124674055 -0.0017487570 -0.0023974454 -0.0099776526 -0.0159053947 -0.0071758283 0.0071800136 -0.0128008235 -0.0031328095 0.0073015961 0.0036283784 -0.0026015815 0.0056123345 0.0046894904 -0.0020737903 0.0053811950 0.0063115110 -0.0022445198 0.0011784430 -0.0035948145 -0.0004712931 0.0023524750 0.0024208597 0.0039311885 0.0001098524 -0.0011094638 -0.0013696022 -0.0034358113 0.0019620527 -0.0027433604 -0.0056683046 0.0001889974 0.0059847868 -0.0000986901 -0.0028609285 0.0044862228 0.0005220924 0.0026145523 -0.0029741523 -0.0018286930 -0.0006442102 -0.0034242631 -0.0066083379 -0.0072144388 0.0042568205 -0.0058146476 -0.0077882003 -0.0034301361 0.0033971229 -0.0054265679 -0.0003221450 -0.0023324139 0.0040998954 -0.0091768360 0.0058194929 -0.0935933824 -0.0000818245 -0.0013610640 -0.0025470049 -0.0001694286 -0.0002767191 -0.0006542509 -0.0008587697 -0.0025073548 0.0000590482 0.0008945042 0.0004778646 0.0007271619 -0.0042284174 -0.0019415578 0.0033554328 0.0038427132 -0.0004688887 -0.0082399316 0.0102701146 0.0028379173 0.0007636557 0.0021228329 0.0054394537 -0.0061847582 -0.0002352729 -0.0000633799 -0.0000558889 0.0000202994 0.0003190477 0.0000134205 0.0140102467 -0.0284549546 0.0141744848 -0.0026150793 -0.0027345305 0.0147580359 -0.0203530969 0.0252826449 0.0004178731 -0.0112026419 -0.0112950993 0.0043499222 -0.0008914866 0.0190827534 -0.0414970377 -0.0259751798 -0.0154364153 0.0254767271 -0.0060968271 0.0040148422 0.0201084386 0.0001052752 0.0047498187 0.0204718533 -0.0022192324 -0.0312456531 -0.0228498258 -0.0003613425 0.0005031651 0.0001728323 0.0001398734 -0.0000179465 0.0002807057 -0.0002508342 0.0001147942 0.0002290435 -0.0084075113 -0.0093150291 0.0060658867 0.0161835158 -0.0006772963 0.0193528487 0.0230143924 -0.0028014274 0.0188498009 -0.0014404472 0.0374680502 -0.0332637653 -0.0096014511 -0.0257172027 0.0061894814 -0.0068580628 -0.0144972190 0.0110202534 0.0552489459 0.0638610078 -0.0372457752 0.0492121085 -0.0246877040 0.0021650598 -0.0191638698 -0.0320694670 0.0264658364 0.0373917425 0.0666254339 -0.0680485537 0.0645217785 0.1481263813 -0.1262367169 -0.0101684349 0.0141450667 -0.0035714690 -0.0056444650 0.0118693927 -0.0081040983 -0.0161229431 0.0239457070 -0.0122846492 0.0190887370 -0.0249651349 0.0186737885 0.0180599096 -0.0280980128 0.0219208458 0.0310605715 -0.0846437436 0.0287489495 0.0576525300 -0.1231576152 0.0302177448 0.0063972007 -0.0282784639 0.0137786211 -0.0597843494 0.1862307492 -0.0444754652 -0.1116728231 0.2433083931 -0.0383185824 0.0066380235 0.0160048896 0.0050944240 0.0063388232 0.0033671400 -0.0150324533 0.0006402648 0.0062017820 -0.0067589311 -0.0031439997 0.0091896333 0.0005364734 -0.0184989685 -0.0369603198 -0.0936307840 0.0160724672 0.0460423473 0.1569565165 0.0076218230 0.0059154990 -0.0297496584 -0.0014019150 -0.0149959639 -0.0779242075 0.0729098756 0.1801575461 0.4054619089 0.0476976096 0.0778812510 0.1851566333 0.0122929769 -0.0277583575 0.0048083144 0.0190083638 0.0203743522 0.0638236102 -0.0716450257 -0.1712559210 -0.3757677479 0.0028859324 -0.0224707023 -0.1041472665 0.0068867583 -0.0012097023 0.0092660994 0.0007148471 -0.0078469721 -0.0075791334 -0.0120876205 -0.0214881042 -0.0084959631 -0.0121006552 -0.0097756910 -0.0144005620 -0.0428775129 -0.0122188460 0.0048036430 -0.0176651184 0.0162412929 -0.0498369413 0.0025361398 0.0030847875 0.0119596856 0.0085511886 0.0093836689 0.0195862948 0.0406324274 -0.0159954408 -0.0078515623 0.0582309779 0.0176132471 -0.0045026898 -0.0001111441 0.0010237858 -0.0005124405 0.0009693461 -0.0017659974 0.0017508651 -0.0008487009 -0.0012234896 0.0019703149 0.0055351891 0.0041851803 0.0005785467 -0.0004165793 0.0003254540 -0.0005322326 -0.0023433335 0.0007577716 0.0006748212 -0.0000958808 0.0014150841 0.0019284236 0.0057737656 -0.0016937223 0.0009482356 0.0030151764 -0.0021347613 -0.0128750335 0.0141588941 0.0096087334 0.0140142653 0.0069674450 0.0050842724 0.0015212431 -0.0040085780 -0.0097579377 -0.0174487853 -0.0037790137 0.0075976772 0.0220982918 -0.0005838076 0.0104003879 0.0098972482 0.0069115055 0.0025487167 0.0047274899 -0.0000944029 0.0083658567 -0.0085851864 0.0025428384 0.0008322290 -0.0064368733 -0.0102725156 0.0077800725 -0.0144228270 0.0203227040 -0.0182372336 0.0016070730 -0.0090629277 -0.0166062897 -0.0112434105 -0.0050619258 0.0140315484 0.0047831556 -0.0033787153 -0.0025887895 0.0022673833 0.0001907075 -0.0006240497 -0.0013160936 0.0042276128 -0.0038234523 0.0058859154 0.0120150912 -0.0050969738 0.0148615894 -0.0006628447 -0.0001685820 -0.0038276623 -0.0042589934 0.0024079320 -0.0068385088 -0.0045263015 0.0007418410 -0.0048669119 0.0023371608 0.0009506099 0.0032113262 0.0046651158 -0.0027719562 0.0087349172 0.0032397144 -0.0018042565 0.0062816241 0.0115894194 -0.0086296533 0.0220647360 -0.0167392009 0.0111794167 -0.0248531437 -0.0258398247 0.0139963653 -0.0374140513 0.0004322316 -0.0018492502 0.0005755552 0.0014874618 -0.0010261177 0.0000799127 0.0039609167 -0.0032440808 0.0043283595 -0.0004319061 0.0000342207 -0.0011565290 0.0003633349 -0.0005083401 0.0002257396 -0.0007291577 0.0000398186 -0.0001404644 0.0008764092 0.0003335234 0.0011707015 0.0005648380 0.0007881464 0.0001621731 -0.0012337767 0.0002379220 -0.0001001660 0.0013974355 -0.0007735221 0.0047848515 -0.0014658822 0.0009202945 -0.0041154185 -0.0023906879 0.0020016576 -0.0039093110 -0.0000605270 0.0009253848 0.0028156845 -0.0000228857 -0.0002256110 -0.0010913862 -0.0002881488 0.0014254812 -0.0005841892 -0.0013934711 0.0027775434 -0.0138800073 0.0037877622 -0.0051212480 0.0070910227 0.0001805786 -0.0000001470 -0.0012664813 -0.0004049816 -0.0016381222 -0.0001513648 -0.0004969378 0.0003277016 0.0004851670 -0.0016751593 0.0006305800 -0.0017958011 0.0019034726 0.0003927992 0.0002337375 0.0031973995 -0.0013279968 0.0012216544 0.0016232839 -0.0005857386 0.0015911612 0.0002468759 0.0000730393 -0.0002085409 0.0000177837 0.0005873227 0.0003071170 -0.0034539821 0.0002142569 -0.0006543005 0.0053542475 -0.0089954622 0.0013844123 -0.0045151941 0.0036759209 -0.0000382942 -0.0058877760 -0.0063509611 0.0125208876 -0.0009846523 0.0069069997 -0.0101767288 -0.0081504664 -0.0010011712 0.0040909901 -0.0012081847 -0.0051767376 -0.0071213821 -0.0017783839 0.0060454222 0.0022078874 -0.0030818622 0.0058279250 0.0033249854 -0.0004688201 0.0008482273 0.0005484333 -0.0001984912 -0.0004990851 -0.0001360474 -0.0004376799 0.0004896109 0.0006806019 0.0001621268 -0.0007440374 -0.0003640641 0.0007430506 0.0003142135 -0.0002645517 -0.0002345302 0.0003519607 -0.0016448297 0.0024145088 0.0061178163 -0.0065544917 -0.0031194411 -0.0044562019 0.0062649963 -0.0028973783 -0.0035925901 0.0059647887 0.0018575596 0.0003244555 -0.0000757640 -0.0044799506 -0.0118697794 0.0085704748 -0.0005993124 -0.0068469548 0.0045889609 0.0092255282 0.0327509740 -0.0258749430 0.0199222281 0.0436259156 -0.0356325350 0.0304520612 -0.0611845650 0.0178906635 0.0206416591 -0.0590910192 0.0128279434 0.0074938058 -0.0129272713 0.0080543221 -0.0328651073 0.0703962753 -0.0195736601 -0.0385959950 0.0626038603 -0.0192327321 -0.2102816349 0.4013309664 -0.1297581362 -0.1982108539 0.3967090944 -0.1226031229 -0.0011884434 0.0154125162 -0.0064086120 0.2090192513 -0.4382101305 0.1284742120 0.2241679086 -0.4538994179 0.1184072194 -0.0005941283 0.0017927900 -0.0015113999 0.0007823996 0.0023142725 -0.0001964221 -0.0009176522 -0.0026249910 0.0050732921 0.0041063662 -0.0044425347 -0.0014000394 -0.0001115733 -0.0033963369 -0.0079060718 0.0011471763 0.0057732740 0.0121867441 -0.0020563573 -0.0002286974 -0.0032406426 -0.0051091045 -0.0026670644 -0.0058748802 0.0053757865 0.0172511489 0.0410731232 -0.0027772075 0.0112216082 0.0190431402 0.0020832116 0.0007426606 0.0005476414 0.0047615795 0.0005068763 0.0064387117 -0.0116271192 -0.0142511437 -0.0399405827 0.0034021973 -0.0038763669 -0.0166696723 0.0005726476 -0.0015947202 0.0047811132 0.0012986782 0.0002090098 -0.0005350215 -0.0038309002 -0.0072117993 -0.0003230323 -0.0023377977 -0.0011058027 -0.0019100226 -0.0066024397 -0.0096074536 -0.0049972107 -0.0015315759 0.0027845865 -0.0098684849 -0.0000766817 0.0014362731 -0.0015495599 0.0004858569 0.0018678919 -0.0004933001 -0.0013050747 0.0016399465 -0.0018676422 0.0025146982 0.0024653831 -0.0015620181 -0.0000923215 -0.0005241526 -0.0001329088 -0.0032675954 -0.0015481081 0.0008186072 0.0012600493 0.0018514712 0.0009121935 -0.0007056442 0.0015444380 0.0015315664 0.0003675496 -0.0002751022 0.0001534251 -0.0032481768 0.0050239696 0.0050321833 0.0044034331 -0.0052850644 -0.0020625121 -0.0044907129 0.0012830786 -0.0004868730 -0.0085997872 0.0000820526 -0.0079401362 -0.0095302460 0.0102364103 0.0230038081 -0.0074216896 -0.0001784335 -0.0035044383 -0.0034445046 0.0024814266 -0.0012078956 -0.0019435971 0.0088722612 0.0070213487 -0.0096789856 0.0034952454 0.0125279846 0.0084200392 -0.0038305771 -0.0078141905 -0.0112823560 -0.0021736811 -0.0092124818 -0.0028196445 -0.0083619838 -0.0119802492 -0.0196721749 -0.0028293617 -0.0130783863 0.0174739999 -0.0121083248 0.0021855370 0.0038132456 0.0002065478 -0.0049803190 -0.0040146578 0.0053927760 0.0001286765 -0.0040194693 -0.0018299058 0.0007587608 0.0006512622 -0.0007927296 0.0042472721 0.0080180019 -0.0046178153 0.0125873151 0.0077284684 0.0051641664 0.0115442918 -0.0030720007 0.0053865765 0.0018222309 0.0001492242 0.0021890523 -0.0029855478 -0.0020631662 0.0034790032 -0.0040732413 -0.0010030376 -0.0048245672 0.0012217341 0.0074615443 -0.0010658158 0.0020677071 0.0020249699 0.0000207204 0.0005191399 0.0144398203 -0.0079692997 0.0227983786 -0.0088228774 -0.0003082593 -0.0146131373 -0.0117450406 0.0159110085 -0.0241171771 -0.0028010063 0.0008666894 0.0015389744 -0.0000254697 0.0032617395 0.0031748177 0.0026854653 0.0005371856 0.0127341707 -0.0020161149 0.0010581268 -0.0030467275 -0.0002545772 0.0015502759 0.0015452480 0.0005071429 -0.0002569416 -0.0025985357 0.0010755049 -0.0023215082 0.0050168802 -0.0009372489 -0.0030430799 0.0013448711 0.0022183107 0.0003093975 -0.0037621281 0.0084218408 -0.0026849635 0.0181954503 -0.0099646363 0.0020383215 -0.0188591449 -0.0061818329 -0.0026492960 -0.0173256049 0.0080827938 -0.0045542081 0.0100242854 -0.0018281447 0.0018171820 -0.0016670295 -0.0019565253 -0.0061703543 -0.0006226771 -0.0019738406 0.0109179047 -0.0133612803 -0.0019619597 -0.0005687036 -0.0007696635 -0.0005145645 0.0007480298 -0.0014953903 -0.0003308082 -0.0028867001 0.0002714837 0.0003148051 0.0010609520 0.0002887865 -0.0037495247 -0.0039901286 0.0001685902 0.0033137451 0.0045127692 0.0002829672 0.0057897493 0.0047806777 0.0015536680 0.0045380613 0.0028437850 -0.0025098616 0.0000325791 0.0002463757 -0.0002134956 0.0000677527 0.0002006431 0.0000571164 -0.0141796691 0.0020737041 -0.0017273192 0.0127545589 -0.0216283259 0.0031117503 -0.0161075684 0.0076586859 -0.0061414206 -0.0110389246 -0.0077235049 -0.0097011241 0.0011982144 0.0031723473 -0.0386290459 -0.0145147083 -0.0149581046 0.0230185751 -0.0075182958 -0.0066965272 0.0035051164 -0.0024638037 0.0131525770 0.0207078268 -0.0054828710 -0.0133195934 -0.0114322127 -0.0005226706 0.0007974557 0.0006545574 -0.0000486666 -0.0006893487 -0.0000879408 -0.0005756573 0.0002273852 0.0006583603 0.0017926259 -0.0007936138 0.0096257547 -0.0235383200 -0.0419479234 0.0429819228 -0.0098216635 -0.0528710570 0.0523369287 0.0016606147 -0.0014575390 0.0134392975 0.0184436801 0.0594478949 -0.0555611667 0.0242138166 0.0432003971 -0.0524189007 0.1532950938 0.3223441636 -0.2972738086 0.1319400678 0.3428482165 -0.2864745637 0.0007319825 0.0045591897 -0.0054322387 -0.1573854466 -0.3843481664 0.3186146109 -0.1734573415 -0.3572317109 0.3051527629 0.0043376635 -0.0029620962 0.0000441754 0.0059735798 -0.0019196423 -0.0032707161 -0.0038633028 -0.0012872458 -0.0017634587 0.0007824785 0.0059373619 0.0063666918 -0.0003380044 0.0038868814 0.0044730395 -0.0113356168 0.0250915449 -0.0091111436 -0.0018396054 0.0248804302 -0.0054173478 -0.0037689765 -0.0032740895 -0.0008976830 0.0202274734 -0.0107492383 0.0103279737 0.0095509255 -0.0122682219 0.0113365716 0.0025305519 -0.0041484872 -0.0017228736 -0.0038004612 -0.0006354290 0.0005163605 0.0037549737 -0.0004406688 -0.0035659476 -0.0009567123 0.0027131787 0.0044804415 -0.0019263001 0.0007773596 0.0030803689 -0.0013646349 -0.0036010463 0.0029042518 0.0035307444 0.0000743935 -0.0009166865 0.0071911169 0.0031378622 -0.0020335888 0.0001999164 -0.0014363795 -0.0057168073 0.0104978091 -0.0002844978 0.0027735217 0.0009539336 -0.0077456093 0.0019484595 -0.0029285536 0.0011454324 -0.0020942314 0.0115753435 -0.0051691660 0.0104597256 -0.0005645052 0.0054121334 0.0092605637 -0.0029798931 0.0076305104 -0.0015440834 -0.0002114341 -0.0034229580 -0.0040527377 -0.0004691541 0.0096946791 -0.0032371275 -0.0070438196 -0.0032624817 -0.0015382442 0.0324653111 0.0017996119 -0.0081528930 0.0035654091 -0.0066415142 -0.0104951095 0.0062097120 -0.0013645137 0.0037720028 0.0098585740 -0.0027976015 0.0087623481 -0.0197586755 0.0114223912 0.0194620186 -0.0017122754 0.0173516400 0.0197782900 -0.0009753364 0.0000207988 -0.0004519066 -0.0014832662 -0.0030328223 0.0019735527 -0.0016265977 -0.0019953344 0.0021434931 0.0038070031 0.0038448152 0.0013785438 0.0002994773 0.0007812046 -0.0005970100 -0.0050832913 0.0015167784 0.0034291608 0.0047870825 -0.0030591502 -0.0005229355 0.0015904868 -0.0009979651 0.0016528969 0.1331358437 -0.0478559923 0.0139147136 0.2194774937 -0.1066710340 -0.0448513512 0.1540889705 -0.0745165381 0.0146654666 0.0213180827 0.0346593728 0.0128141398 -0.0182842508 -0.0609524689 0.0237129009 0.0177690344 -0.0490097782 -0.0081464320 -0.0540224469 0.0394155810 0.0065360063 -0.0611284276 -0.0847132044 -0.0376240185 -0.0719136477 -0.0319009186 -0.0255742588 -0.1183937501 -0.0776181335 -0.0420014243 0.0183277970 -0.0026223272 0.0272491550 -0.0675321548 -0.0581689038 -0.0194768255 0.0043717403 0.0244341067 0.0082785743 0.0099565382 0.0075933390 -0.0046157566 -0.0009244218 -0.0020071085 0.0096385617 0.0018415406 -0.0073230837 -0.0120054053 0.0039811964 -0.0194286013 0.0038198326 0.0052627824 -0.0098795923 -0.0080643282 -0.0043149454 -0.0012810728 -0.0007397808 -0.0079525666 -0.0033997391 -0.0014165885 0.0051174018 0.0121426724 0.0017374434 -0.0046917357 0.0008455356 0.0068661104 -0.0008507190 0.0008629114 0.0052479206 0.0037828087 0.0024029924 0.0233809099 -0.0061325015 0.0172539117 -0.0006948385 -0.0114365669 -0.0057573498 -0.0081280842 0.0016301327 -0.0067676067 -0.0027079293 0.0040364730 -0.0038540809 -0.0028238189 0.0101575174 -0.0094552345 0.0055723426 0.0007725966 -0.0013419765 -0.0002199873 0.0002328533 -0.0014169558 -0.0015148533 -0.0059853624 0.0009073728 -0.0066503469 0.0057758663 0.0005246790 0.0099268710 0.0043361553 0.0029318165 0.0050399634 -0.0078210426 0.0015880567 -0.0051085285 0.0186488594 -0.0081479494 0.0509745613 -0.0252333916 0.0141199658 -0.0580670330 -0.0151084872 0.0086479117 -0.0396583993 0.0163482933 -0.0027630921 0.0536442636 0.0044511315 -0.0019941194 0.0066804706 0.0022184214 0.0070715645 -0.0017931514 0.0073973688 0.0002299810 0.0414917723 -0.0253858733 0.0052432613 -0.0110855183 -0.0004735767 0.0014895760 -0.0003521785 -0.0003270900 -0.0013454660 0.0005744833 0.0005700795 0.0005222610 0.0001595881 -0.0052211420 -0.0013455821 -0.0020257501 0.0046425728 0.0033940212 0.0018784580 0.0071453221 0.0007776401 0.0014338571 0.0058049991 0.0001806590 0.0010002937 0.0002187105 0.0001475742 -0.0002868729 0.0001996599 -0.0003307259 -0.0001534405 -0.0159047853 0.0034938762 -0.0028473868 0.0159682114 -0.0256949716 0.0030461246 -0.0122485980 0.0049472523 -0.0043754305 -0.0097788072 -0.0094556511 0.0114030922 0.0006985567 0.0079156673 -0.0251092420 -0.0170056738 -0.0082371250 0.0154413327 -0.0065186372 -0.0140991941 -0.0118777931 -0.0047427359 0.0185860372 0.0159840329 -0.0092698811 0.0001387608 -0.0021740633 0.0000013202 -0.0001134624 0.0000379461 0.0000642997 -0.0009703376 -0.0003882284 -0.0004426154 -0.0005920181 0.0004422875 0.0396905995 -0.0035588685 -0.0105959939 -0.0540932933 -0.0261434063 -0.0088611478 -0.0813631099 -0.0380033087 -0.0382253622 0.0682569476 0.0234752873 -0.0380536615 -0.0382311172 0.0480321773 0.0693660250 -0.0326173172 0.0121476652 0.0403815067 0.0335900784 0.1702790445 -0.2000701751 -0.1145742429 0.1492767421 -0.0960535100 0.0629740190 -0.0650719421 0.0213830537 -0.1076567756 0.1367935279 -0.0408144080 0.0538834290 0.1963736331 -0.1149423801 0.0349625250 -0.0145075497 -0.0018562899 0.0510819095 -0.0015288710 -0.0243618441 -0.0492002326 0.0313025482 -0.0232203030 0.0217683481 0.0009127138 0.0548534306 0.0233415132 -0.0116964976 0.0329670815 -0.0636858362 0.1757583668 -0.0649815951 0.0441175980 0.1112511777 -0.0032945977 -0.0226312519 -0.0622594681 0.0082219125 0.0260591623 0.1430780002 0.0079957625 -0.0752832595 0.1893364038 -0.0130830560 -0.0409527623 -0.0179506084 -0.0677202700 -0.0038278822 0.0549415656 0.0588160321 0.0279437449 0.0019054059 -0.0391660516 -0.0094332264 0.0320573709 0.0343348857 0.0565433923 -0.0008357735 -0.0005762854 0.0142990490 0.0850601859 -0.0722373538 -0.0790315608 0.0061457972 0.0138433578 -0.1673818488 -0.0628876212 0.0635706729 -0.0302576929 -0.0282580228 -0.0493485637 -0.2461317968 0.0507745683 -0.0120953783 0.0003319844 0.1535259467 -0.0498486299 0.0891982051 -0.0636998325 -0.0014616029 -0.1755947068 0.1850084033 -0.0005776441 0.0999877303 -0.0403125444 0.0017597696 0.0261492804 0.0451759412 -0.0594388557 -0.0272013834 -0.0108190338 -0.0235600166 0.0322887472 0.0924087379 -0.0461628483 -0.0217517053 -0.0509898380 -0.0347220444 -0.0201087104 0.1926003466 0.1283402887 -0.0869586132 -0.0155117616 0.0065299841 0.0141680010 0.0180362628 0.0491053508 0.0351820377 -0.0119423528 0.1108336750 0.1403058862 -0.0741693285 -0.0693162211 0.1752512371 0.0183044771 0.0463095527 -0.0015823946 -0.0003994115 -0.0000393765 -0.0003781646 -0.0016305878 0.0008082262 -0.0031976600 -0.0038265241 0.0007565377 0.0012614063 0.0006756540 0.0001628866 0.0001749136 0.0012557532 -0.0005795173 -0.0035447706 0.0005134661 0.0018028941 0.0067438082 -0.0060439857 -0.0032394203 -0.0021927639 -0.0007557095 0.0028877004 -0.0330090061 0.0211997626 0.0309676455 -0.0532455851 -0.0047732433 -0.0194361422 -0.0395601704 -0.0011967670 -0.0066364688 0.0124724465 0.0354260131 0.0588568492 0.0150619660 -0.0033944382 -0.0680848181 -0.0407365779 0.0023108229 0.0743743463 0.0483779879 -0.0175987494 -0.0296532234 -0.0794903853 -0.0408119651 -0.0543881610 -0.0388310582 -0.0612842137 -0.0699445527 -0.1096105111 -0.0518160280 -0.0795842975 0.0865741881 -0.0634607251 0.0060079955 0.0180188769 0.0422908982 0.0310761731 -0.0225870655 0.0095125953 0.0002451490 -0.0223273755 -0.0096241707 0.0168650039 -0.0071147823 0.0088323909 -0.0220954935 -0.0035172636 0.0517596897 0.1510377206 0.0334862166 0.2071646068 0.0795042678 -0.0749099152 0.1322928044 0.0884327086 0.0434828955 0.0311613315 -0.0263071057 0.0599856198 0.0594412433 -0.0272403381 -0.0633014531 -0.1489119597 -0.0118919406 0.1049633667 -0.0071343943 -0.0564220376 0.0315105988 -0.0211624127 -0.0267995642 0.0856218839 -0.0766850147 -0.0328738914 -0.0040233502 -0.1718993823 -0.0709251566 0.0608765460 0.1843126142 -0.0481799193 -0.0315985721 0.0617876730 0.0397144792 -0.0350962357 0.0720801111 0.0483448275 -0.0594650073 0.0915132973 0.0810356020 -0.0176432856 0.0190746441 -0.0164241078 -0.0081326126 0.0262372359 0.0197474747 0.0438042063 -0.0004599840 -0.0010827812 -0.0320574433 -0.0335894706 -0.0098162130 -0.0336581853 -0.0634075916 -0.0047487430 0.0702327282 -0.0061241163 -0.0154803327 0.0050644467 0.0186713917 -0.0763524727 0.0269823822 -0.0398921471 0.1296968315 0.0393875149 -0.1065104666 0.0158471724 0.0168426410 -0.0585607369 -0.1519238874 -0.0318967476 0.0346665553 -0.0443409034 -0.0487364128 -0.1029623521 0.0032262582 -0.0766394934 -0.0086278073 -0.2375539798 -0.0256313685 0.0017025740 -0.0119360054 -0.0003819509 -0.0091189695 -0.0061582437 -0.0039421008 -0.0209819715 -0.0049438205 -0.0131192469 0.0001166546 0.0034721899 -0.0098230105 -0.0139103585 0.0059582661 0.0123059830 0.0153187549 -0.0082938176 0.0229678465 0.0130914811 0.0008582423 0.0139689771 0.0138075769 -0.0098949757 0.0095204605 0.0030521738 -0.0027773301 0.0009967054 0.0051192796 0.0018947994 -0.0297332577 -0.0171873090 0.0071900357 0.0325100739 -0.0622104543 0.0230864111 -0.0758183885 0.0524117224 -0.0203079748 -0.0393511050 -0.0284142233 0.0050197108 -0.0007398310 0.0413262486 -0.1151655992 -0.0441561360 -0.0360789620 0.0581736327 -0.0230107943 -0.0113878065 0.0277589019 -0.0068428496 0.0413179417 0.0719691209 -0.0184247113 -0.0639964578 -0.0497401927 -0.0103415683 0.0144360015 0.0112978894 -0.0038208248 -0.0179628121 -0.0076058689 -0.0081599874 0.0104007244 0.0099417849 -0.0142053727 -0.0002662174 0.0035824142 0.0200740017 0.0190949357 -0.0167056999 0.0222075093 0.0263871429 -0.0073210415 -0.0205147332 -0.0134169251 0.0142643003 0.0091274699 -0.0263669151 -0.0070129253 0.0060423959 -0.0113705118 -0.0010229712 -0.0617323512 -0.1644339071 0.1587807088 -0.0230965268 -0.1382792879 0.1202584990 -0.0173703529 0.0243284633 -0.0089653299 0.0676725051 0.0444766992 -0.0565090295 0.0189895888 0.0046763435 -0.0218218968 0.0293964053 -0.0093792339 0.0018476972 0.0450735891 -0.0004376391 -0.0245459335 -0.0380589827 0.0049823937 -0.0182444875 0.0202419753 0.0173259868 0.0545633480 0.0168743486 0.0056021906 0.0341188882 -0.0403556631 0.1270974753 -0.0439813646 0.0351032841 0.1086395814 -0.0078303961 -0.0339111090 -0.0392411116 -0.0053588432 0.0706501200 0.0831428436 0.0287296416 -0.0098000656 0.0864191260 0.0330705537 0.0112679547 0.0043657846 0.0206959283 0.0007663850 -0.0172655768 -0.0168440730 0.0330363108 -0.0037833449 -0.0369512138 -0.0104584294 0.0268100335 0.0412970683 -0.0099344463 0.0017231133 0.0178251940 -0.0040386137 -0.0274589148 -0.0192403565 0.0185663948 -0.0039283329 0.0150348434 0.0438332179 0.0210330172 0.0068398363 -0.0227709253 -0.0580145435 -0.1260243550 0.0451985269 -0.0431018559 -0.0738301650 -0.0061540885 -0.0318877239 0.0036790701 -0.0317843943 0.0102478134 -0.0203555753 0.0718792973 0.0153896756 0.1366035900 -0.0257955510 0.0271768894 0.0679396080 -0.0011546408 0.0527683121 -0.0234119296 -0.0149042604 -0.0113372796 -0.0322889755 -0.0031431488 0.0850851403 -0.0319107458 -0.0601852838 -0.0430882866 -0.0236432027 0.2174178062 0.0496267497 -0.0303689481 0.0102374229 -0.0601447031 -0.0919033114 0.0471639775 0.0112908280 0.0192288180 0.0731431917 -0.0238734542 0.0879471222 -0.1126446823 0.0727635636 0.0839094998 0.0186648431 0.1099596689 0.1492486177 0.0111910700 0.0080550907 -0.0039228492 -0.0039849600 -0.0059461404 0.0082086535 0.0202731704 0.0227324407 0.0057749401 0.0194141425 0.0299867331 0.0104188724 -0.0093047324 0.0006888741 0.0020489308 -0.0249196008 0.0168208742 0.0192329375 -0.0115736046 0.0087747684 0.0113004976 0.0161942524 -0.0033971651 0.0030602530 0.0351132254 -0.0172572688 -0.0167383824 0.0555322437 -0.0027955481 0.0089271901 0.0405766667 -0.0034738489 0.0030975856 -0.0103501400 -0.0168569514 -0.0335138247 -0.0166801429 -0.0049572280 0.0411852454 0.0239847263 -0.0060739310 -0.0632019566 -0.0407744015 0.0100904664 0.0127919827 0.0601657327 0.0263345281 0.0438786792 0.0274547784 0.0451230173 0.0546938423 0.0768567336 0.0378110538 0.0660295498 -0.0788160927 0.0615104126 -0.0032479785 -0.0159886389 -0.0318855850 -0.0203299062 0.0286159568 -0.0154685611 0.0023626910 0.0199996861 0.0120457352 -0.0146486541 0.0102518442 -0.0070403003 0.0222328423 0.0626853995 -0.0345086460 0.1348914183 0.0146421209 0.1295564982 0.0420881009 -0.0458409914 0.0804716429 0.0565278135 0.0341268326 0.0178519027 -0.0193706106 0.0275409718 0.0359210635 -0.0076639812 -0.0393422570 -0.0789302704 -0.0077450768 0.0836048421 0.0123448287 -0.0426211977 0.0154122306 -0.0125126496 -0.0151365279 0.0288171599 -0.0210779214 -0.0252989989 -0.0091124915 -0.0915382581 -0.0053215204 0.0666659971 0.1437915709 -0.0160581251 -0.0336507625 0.0159307387 0.0169443248 -0.0099048911 0.0684847452 0.0394028940 -0.0074965327 0.0605454560 0.1498295247 -0.0146271671 0.0167866507 -0.0166603748 -0.0068122174 0.0239524449 0.0172393830 0.0331741857 -0.0031261776 0.0042496504 -0.0293052396 -0.0290735306 -0.0093627677 -0.0291043974 -0.0525029116 -0.0065321978 0.0554185042 -0.0038039697 -0.0087442911 -0.0108733265 0.0172760585 -0.0789765284 0.0327231292 -0.0499202315 0.1330658145 0.0432927800 -0.0929354472 0.0263100978 0.0026341788 -0.0405424848 -0.1415828099 -0.0231103762 0.0331273527 -0.0367646181 -0.0408605029 -0.0728784374 -0.0062429239 -0.0368675516 -0.0249911255 0.0290131874 0.0207460464 0.0005482268 0.0094816222 -0.0022149220 -0.0132798064 -0.0112393124 -0.0114331927 -0.0456212014 -0.0088367285 -0.0260704818 0.0015585720 0.0072469411 -0.0388331226 -0.0364100103 0.0034791953 0.0418075199 0.0498405675 -0.0017160164 0.0686284464 0.0357341860 0.0086356192 0.0517631400 0.0277483907 -0.0162878284 0.0218137325 0.0078925645 -0.0069378568 0.0030710645 0.0080145911 0.0027294521 -0.1500795326 0.0049950878 -0.0099884412 0.1404737738 -0.2397647602 0.0473439884 -0.1966329121 0.1029846514 -0.0692980219 -0.1254693620 -0.0929855121 0.0316107600 -0.0009243929 0.1113293230 -0.3391528121 -0.1399659085 -0.1084410929 0.1803463500 -0.0720412816 -0.0800849041 0.0078708896 -0.0327352664 0.1580315273 0.2083814022 -0.0736506087 -0.1255299746 -0.1074537963 -0.0215250372 0.0278663677 0.0224273832 -0.0079459523 -0.0428103020 -0.0191983302 -0.0183746305 0.0180496561 0.0218155458 0.0100026699 -0.0064309884 0.0021523659 -0.0130895380 -0.0057235011 0.0016114649 -0.0206477094 -0.0135883836 -0.0030117875 0.0164409388 0.0064459208 -0.0096253387 -0.0109094957 0.0139256973 0.0136615237 -0.0079554654 0.0052383904 0.0073637210 0.0186460261 0.0644646140 -0.0662368333 -0.0185414818 0.0620016303 -0.0419059938 0.0181007820 -0.0150411808 0.0040730913 -0.0390877342 0.0135073585 0.0042466849 0.0050353949 0.0459115232 -0.0208801046 -0.0204399654 0.0055004602 -0.0056089305 -0.0321365401 0.0006078341 0.0160353380 0.0283409755 -0.0069161420 0.0138699557 -0.0159089192 -0.0128416504 -0.0377258629 -0.0147170492 -0.0020297496 -0.0229818812 0.0285196525 -0.0960008320 0.0284815701 -0.0219546130 -0.0766903347 0.0078429325 0.0262903613 0.0353045529 0.0020596419 -0.0533571567 -0.0623035300 -0.0185831442 0.0101286586 -0.0782052831 -0.0215105915 -0.0108003953 -0.0059946419 -0.0184566414 -0.0006970569 0.0146270521 0.0166311152 -0.0259181381 0.0024566063 0.0300073927 0.0088408285 -0.0222373569 -0.0323514308 0.0124756316 0.0000579304 -0.0106281198 0.0019988819 0.0231965312 0.0049397933 -0.0185334865 0.0052665267 -0.0084889648 -0.0439614268 -0.0186880198 0.0027519025 0.0122642722 0.0332424381 0.0671440231 -0.0528932719 0.0306950995 0.0420710052 0.0052443130 0.0322210082 -0.0070065543 0.0301306808 -0.0133708263 0.0118358968 -0.0572147537 0.0073819499 -0.0798120771 0.0299604518 -0.0180866844 -0.0425702428 -0.0037800743 -0.0367989070 0.0145968091 0.0123953752 0.0062198285 0.0244069019 0.0069736809 -0.0591698958 0.0244417593 0.0492825152 0.0357415488 0.0209172100 -0.1598380824 -0.0298756177 0.0272132540 -0.0074602665 0.0462390199 0.0820381013 -0.0365104854 -0.0122762207 -0.0103388523 -0.0556942638 0.0170667125 -0.0672161193 0.0890092464 -0.0593007073 -0.0581392739 -0.0138299086 -0.0849550747 -0.1139011248 0.0187006420 0.0140250283 -0.0092252644 -0.0143097017 -0.0185208098 0.0186783217 0.0347465023 0.0379451406 0.0153077030 0.0419386901 0.0555664756 0.0163508313 -0.0229285345 0.0118375431 0.0038605025 -0.0592254646 0.0266706306 0.0348808326 -0.0037256454 0.0023633140 0.0135141143 0.0078102132 -0.0027917333 0.0177509090 0.0056425245 -0.0024237953 -0.0040288180 0.0152697773 -0.0159729781 -0.0075887758 0.0108162293 -0.0097771773 0.0065152127 -0.0041368565 -0.0028798035 -0.0096330832 -0.0069175039 0.0016637791 0.0107067030 0.0025288272 -0.0033720214 -0.0171467916 -0.0107984729 -0.0019754787 0.0036750358 0.0195547295 0.0167279680 0.0112121068 0.0076243813 0.0115373945 0.0152172140 0.0348854954 0.0155494565 0.0138929269 -0.0193886332 0.0157135246 -0.0008829462 -0.0030588344 -0.0120300372 -0.0105608825 0.0083635868 -0.0011130827 0.0030275791 0.0040104070 0.0018422560 -0.0074962912 0.0029092434 -0.0047540702 0.0126252117 -0.1090790787 0.1089966475 -0.0372671169 -0.0022727479 0.1244641002 0.0100392783 -0.0384065493 0.0710273146 0.0528201552 0.0218542933 0.0182044817 -0.0083719319 0.0437639287 0.0309757755 -0.0132162308 -0.0360617704 -0.0905845581 -0.0079870826 0.0430954776 -0.0091876965 -0.0352109850 0.0138962746 -0.0131069633 -0.0218101469 0.0352787216 -0.0318507542 -0.0547464016 0.0066079856 -0.1078766564 -0.0490804149 0.0438663699 0.0700475296 0.0031919937 -0.0000985844 0.0476457494 0.0336807543 -0.0310284657 0.0190044146 0.0134422587 -0.0565559315 0.0440226377 -0.0405616124 -0.0084288427 0.0073693582 -0.0023270734 -0.0011816349 0.0061289198 0.0057441544 -0.0032058901 0.0062318330 -0.0468766136 0.0150736348 -0.0174433871 0.0512374389 0.0031491067 -0.0269125008 0.0301155245 0.0112397801 0.0023714604 -0.0458545315 0.1290525436 -0.0392747614 0.2602291628 -0.1491894495 0.0630508002 -0.3001927231 -0.0946211611 -0.0076961120 -0.2418571310 0.1210451024 -0.0598871795 0.2149948100 -0.0120184946 0.0075905927 -0.0164519436 -0.0269230606 -0.0524725098 0.0020980980 -0.0360675700 -0.0115106682 -0.0676924879 0.0070674725 -0.0017123982 0.0036357326 -0.0014203812 0.0297836086 0.0060643211 0.0200930023 0.0489089314 0.0167037447 0.0431634834 0.0059393456 -0.0098524772 0.0341096424 0.0271099597 -0.0056475564 -0.0412505364 -0.0415824958 0.0077869113 -0.0682755912 -0.0279521334 -0.0074094483 -0.0496561713 -0.0242772979 0.0163935271 -0.0331408488 -0.0103948565 0.0091950657 -0.0044732168 -0.0113191549 -0.0046883801 0.1148755274 0.0187122952 -0.0034118017 -0.1214267469 0.2115188772 -0.0543155898 0.1869714890 -0.1080688450 0.0604478853 0.1279054947 0.1001036967 -0.0507931350 0.0055224167 -0.1262039472 0.3263001805 0.1378826877 0.0916206273 -0.1584596764 0.0684199094 0.0806585730 0.0002119488 0.0307247435 -0.1483032258 -0.1930365404 0.0709242511 0.1193848071 0.1030248108 0.0290746461 -0.0347014894 -0.0269222329 0.0116148600 0.0592582670 0.0284491364 0.0242077867 -0.0236173134 -0.0301100544 0.0069078765 0.0069637349 -0.0070090260 -0.0065797124 -0.0064889265 0.0080971945 -0.0071413676 -0.0108193467 0.0066595979 0.0077557911 0.0139188938 -0.0126274349 -0.0032819732 0.0001481479 0.0041171459 -0.0043988383 -0.0036801986 0.0038505059 0.0304201583 0.0674175648 -0.0609436681 0.0149172166 0.0615737245 -0.0515806554 0.0040312967 -0.0169985139 0.0109028309 -0.0023965806 0.0154467609 -0.0103985884 0.0113279906 0.0311572744 -0.0255606834 -0.0066717833 0.0044967882 -0.0031115830 -0.0089979288 0.0012113520 0.0037371963 0.0103525567 -0.0062180854 0.0054165106 -0.0055852539 -0.0014954220 -0.0106963528 -0.0064613615 0.0033434913 -0.0069812857 0.0165689979 -0.0431706617 0.0125784147 -0.0039816890 -0.0254351338 0.0024041462 0.0059410549 0.0142063395 -0.0013050409 -0.0099685249 -0.0324262702 -0.0002190542 0.0151523797 -0.0470659847 0.0010627516 -0.0030608238 0.0007525027 -0.0083618201 0.0001693466 0.0080793529 0.0033980079 -0.0074215636 0.0000829267 0.0093739431 0.0028501263 -0.0072666488 -0.0091947681 0.0046670680 -0.0000083655 -0.0036533050 0.0004330711 0.0095009691 -0.0013300473 -0.0058416217 0.0044784172 -0.0040881933 -0.0163084207 -0.0072897477 0.0020851742 0.0076251346 0.0138615601 0.0214572520 -0.0198952744 0.0084381888 0.0122575016 0.0020626406 0.0141018428 -0.0028008215 0.0127945417 -0.0067882548 0.0048591304 -0.0247873608 0.0055404538 -0.0286541794 0.0112298825 -0.0110920060 -0.0182019275 -0.0019832206 -0.0141470615 0.0070768667 0.0052646903 0.0026164758 0.0085123316 -0.0002260175 -0.0222124915 0.0101841025 0.0159304501 0.0143422943 0.0083314255 -0.0446260328 -0.0202254059 -0.0004691524 0.0053277161 0.0144711588 0.0223007197 -0.0108471297 -0.0062673122 -0.0043854152 -0.0178750232 0.0057071019 -0.0254691171 0.0169520132 -0.0134265103 -0.0095338694 -0.0133495189 -0.0241870545 -0.0351270979 -0.0421835969 -0.0248837137 0.0109193792 0.0062034885 -0.0049967968 -0.0088579482 -0.0760931465 -0.0857639712 -0.0046343989 -0.0362502730 -0.0511875453 -0.0090832513 0.0452606178 -0.0106015112 -0.0151518519 0.0317266239 -0.0286248900 -0.0121987256 0.0770699221 -0.0420042335 -0.0222814783 0.0089708809 -0.0141779093 -0.0046956676 -0.0069150349 0.0021298031 0.0027357136 -0.0191946174 0.0117681600 0.0030412729 -0.0118533447 0.0083202967 -0.0036099530 0.0004103181 0.0004225035 0.0045216292 0.0027730528 0.0002044446 -0.0065682132 -0.0015482011 0.0030770787 0.0058487665 0.0054290252 -0.0002509024 -0.0027753330 -0.0048756578 -0.0057504072 -0.0018971823 0.0003545808 -0.0028749543 -0.0042495254 -0.0127312893 -0.0031822813 -0.0003895537 0.0040916520 -0.0038955197 -0.0007638569 0.0047137107 0.0079972103 0.0060312689 -0.0023298592 -0.0023226281 -0.0011649048 -0.0007701418 0.0002642775 0.0028886649 -0.0006473436 0.0020889930 -0.0061603847 -0.0210368693 0.0013383355 -0.0404477356 0.0083588244 -0.0264389821 0.0115807607 0.0060887004 -0.0117508894 -0.0106410807 -0.0066056378 -0.0009639412 -0.0035708945 -0.0102193140 -0.0043362094 -0.0023827632 0.0060623227 0.0155405245 0.0018003912 -0.0035504177 -0.0004101192 0.0110714149 0.0000738737 0.0016088002 0.0078449161 0.0070915636 -0.0008348160 0.0318358779 -0.0072088706 0.0217206578 0.0003884414 -0.0216626926 -0.0040600174 -0.0226590744 0.0004821938 -0.0096244189 -0.0009935869 0.0087217659 -0.0016071916 0.0009422443 0.0316620191 -0.0223921558 0.0371668659 -0.0056025635 -0.0001404567 -0.0106050985 0.0036775006 -0.0019241908 0.0039149575 -0.0311947947 0.0049190175 -0.0583761573 0.0370826208 -0.0086865198 0.0801801221 0.0210216460 -0.0044895100 0.0423944116 -0.0264030608 0.0094379378 -0.0527329062 0.1615949783 -0.0629077442 0.4033758311 -0.2133841352 0.0973406389 -0.4645002036 -0.1502487341 0.0415451788 -0.3586702248 0.1454602038 -0.0422309682 0.3611990804 -0.0036035135 0.0021205341 -0.0178957680 0.0042854614 0.0082993592 -0.0013094578 0.0077102117 0.0041412736 0.0215915927 -0.0023634309 0.0023802812 -0.0014441091 0.0013420057 -0.0173655097 -0.0047708840 -0.0081832347 -0.0318393004 -0.0096390153 -0.0282877561 -0.0044098109 0.0052366335 -0.0233445618 -0.0098605035 -0.0044147255 0.0268596634 0.0277581244 0.0065379457 0.0436177267 0.0089066513 0.0051831176 0.0354695610 0.0043903331 0.0005447725 0.0200574084 0.0059417413 -0.0051863704 0.0031270140 0.0074036568 0.0033902705 -0.1000463385 0.0224827064 -0.0157502128 0.0968626832 -0.1579094429 0.0195541239 -0.0917195228 0.0275306544 -0.0465923833 -0.0813058324 -0.0690262819 0.0702339749 0.0012293525 0.0713390491 -0.1689231035 -0.0905166224 -0.0311893442 0.0732515600 -0.0413310309 -0.0794038868 -0.0549807159 -0.0257528070 0.1081400920 0.1046683233 -0.0531713677 -0.0232204242 -0.0300113792 -0.0152439441 0.0218436930 0.0174874232 -0.0069695354 -0.0372930091 -0.0162654899 -0.0182366324 0.0167885176 0.0224660388 -0.0020717811 -0.0026443577 0.0018965279 0.0053315958 0.0101920125 -0.0020532426 0.0061992434 0.0097124711 -0.0007675713 -0.0061570780 -0.0072386152 0.0065919613 0.0003360398 -0.0074207347 -0.0033172601 -0.0019643917 -0.0036909749 -0.0034697337 -0.0284228327 -0.0509488068 0.0543488100 -0.0041513935 -0.0461503993 0.0376038698 0.0058929794 0.0109715565 -0.0046740003 0.0170922489 0.0123165372 -0.0172188246 -0.0032210675 0.0027542323 -0.0055368823 0.0014779373 -0.0022242945 0.0009107565 0.0011831708 -0.0002044736 -0.0007071143 -0.0030651901 0.0029865138 -0.0017274261 0.0020084031 -0.0013824070 0.0026909643 0.0026580282 -0.0030320086 0.0021826511 -0.0052807996 0.0109851219 -0.0034282431 0.0008546789 0.0039362590 0.0000931183 -0.0002946285 -0.0042299888 0.0011744770 -0.0033647032 0.0189234612 -0.0035744232 -0.0101586123 0.0238951796 -0.0038491993 -0.0004888815 -0.0048696000 -0.0004268115 -0.0010358826 -0.0016047947 0.0025111153 0.0012297030 0.0003017315 -0.0019625507 -0.0005951505 0.0017269613 0.0015049085 -0.0050124154 0.0005461556 0.0013266322 -0.0010630337 -0.0080636959 0.0034308015 0.0058087086 -0.0022352494 0.0016396935 0.0144470589 0.0060418850 -0.0033108398 -0.0021508668 -0.0058517147 -0.0093396481 0.0187680049 -0.0062905620 -0.0071849387 -0.0005815556 -0.0134786912 0.0033692771 -0.0090680436 0.0055806715 -0.0021993347 0.0195940411 -0.0105073429 0.0142693722 -0.0084362553 0.0070156243 0.0075716328 -0.0001492992 0.0043644933 -0.0015070141 -0.0015800757 -0.0006523306 -0.0020688968 -0.0004499002 0.0064046340 -0.0024083034 -0.0050032154 -0.0038562824 -0.0018759824 0.0182942577 0.0030690301 -0.0027107177 0.0007472036 -0.0054672104 -0.0072383276 0.0036539757 0.0016209335 0.0002823369 0.0054686084 -0.0018912697 0.0061514007 -0.0097124534 0.0067219364 0.0054086889 -0.0006664811 0.0083566839 0.0118250079 0.0240663134 0.0187068605 -0.0073334550 -0.0000438499 0.0022154402 0.0078104834 0.0383286909 0.0418802429 0.0023935432 0.0229479501 0.0385863818 0.0071364253 -0.0257208691 0.0042451607 0.0094588355 -0.0184894027 0.0179868223 0.0092992481 -0.0507274015 0.0309977410 0.0168488860 0.0023652889 0.0083969320 -0.0009958997 0.0180623573 -0.0117666511 -0.0071264146 -0.0080694686 0.0627316185 0.0209537808 0.0025761645 0.0444879204 -0.0208524347 -0.0024031614 -0.0190516329 0.0010132342 0.0010144965 -0.0150537277 0.0196258075 -0.0057172188 0.0262447280 -0.0006988650 0.0043529476 0.0075064918 -0.0083338995 0.0073662995 -0.0445552577 0.0175980181 0.0311376912 0.0082900608 0.0029079437 -0.1090268861 0.0219478995 0.0822048458 -0.0126299407 0.0060524725 -0.0129404679 -0.0174493623 -0.0164203134 -0.0075680746 0.0043631178 0.0032109759 0.0027771683 0.0042446665 0.0026657581 -0.0029516507 0.0056125376 -0.0030731123 0.0049474323 0.0109990712 -0.0246269543 -0.0127880019 -0.1558536047 0.0874645805 -0.2559404034 0.0179341896 -0.0136420453 0.0327414103 0.0373949553 -0.0246001026 0.0507705321 0.0450457803 -0.0259994807 0.0830871255 -0.0078848546 0.0130220957 -0.0178010642 -0.0449466429 0.0409890682 -0.0867034681 -0.0381046695 0.0191245199 -0.0626842631 -0.2577373059 0.1326886278 -0.4244213237 0.0990447293 -0.0462998280 0.1825668314 0.2838605646 -0.1366306213 0.4109691509 -0.0141469193 -0.0086163470 -0.0118600493 0.0043578058 0.0251334899 0.0069199258 -0.0016481684 0.0275001095 0.0435245305 -0.0022378576 0.0053354139 -0.0004128502 -0.0020137993 0.0077799320 0.0031870815 0.0034572489 -0.0015775794 -0.0043384708 -0.0068334795 -0.0101534446 0.0040995933 -0.0062112071 -0.0163391241 0.0028338369 0.0118325507 0.0002335683 -0.0068842692 0.0090940170 -0.0023484690 0.0146347800 -0.0143413979 -0.0109252859 -0.0105570394 0.0024608228 -0.0256476641 -0.0229830553 0.0162000713 -0.0135234748 0.0023564352 -0.0014562191 0.0106952954 -0.0054917345 0.0027812883 -0.0040795586 0.0116050814 0.0123099597 -0.0527130281 0.0744061485 -0.0115978975 0.0417667887 -0.0073794481 -0.0015802769 0.0166245348 0.0010660552 0.0050004049 0.0123766963 0.0084104263 0.0189673179 0.0051053816 -0.0030022411 -0.0084203350 -0.0005445075 -0.0012012541 0.0035312952 0.0010460097 0.0005031848 0.0035241623 -0.0027550540 -0.0000747504 0.0020443806 -0.0020455549 0.0016833523 -0.0107621720 -0.0032512087 0.0019637142 -0.0011782657 -0.0048740997 -0.0025632298 -0.0071110341 -0.0016683394 0.0003343933 0.0110004959 -0.0189340187 0.0023381353 -0.0073414476 0.0025993865 -0.0027303235 -0.0055673782 -0.0068501924 0.0156960760 -0.0012848489 0.0091587396 -0.0080423504 -0.0069575631 0.0071202604 -0.0054239898 -0.0022857236 -0.0088641605 -0.0113616734 -0.0029540057 0.0075356794 0.0019190539 -0.0047112136 0.0090235018 0.0051123182 0.0090674258 -0.0121703235 -0.0094700067 0.0044132104 0.0182114842 0.0085767732 0.0085880933 -0.0105183711 -0.0113418400 -0.0032876719 -0.0165368644 0.0131570659 0.0015732810 0.0143590725 -0.0127719115 -0.0024839646 0.0092291635 -0.0122480358 -0.0017013755 -0.0260764688 0.0203445339 -0.0003067513 0.0187687164 -0.0056154751 0.0029604245 0.0172911904 -0.0112838651 -0.0489269290 -0.0757686739 0.0686655904 -0.0318984824 -0.0546878679 0.0496512503 0.0138960788 0.0202653528 -0.0162294912 -0.0479291036 -0.0665457900 0.0614196247 -0.0507344702 -0.0801712496 0.0820629733 0.0129484302 -0.0453422784 0.0034242016 0.0005100504 -0.0329263198 0.0087813847 -0.0139492653 0.0524533692 -0.0089089957 0.0020132292 -0.0193329263 -0.0014209259 0.0037682453 -0.0263757705 0.0067373546 -0.1394222279 0.2183934974 -0.0794529286 -0.1038749871 0.1682258345 -0.0601828115 0.0342327343 -0.0285271652 0.0267371839 -0.0629064498 0.0786443763 -0.0278819753 -0.0771481653 0.1135844905 -0.0416736073 -0.0051000752 -0.0099897053 -0.0042648451 -0.0022988502 -0.0005544976 0.0114951691 -0.0212201865 0.0125975247 0.0097799008 0.0056329554 -0.0002452836 -0.0258213670 -0.0067391988 0.0025723534 -0.0021625123 -0.0034108400 -0.0140854368 0.0135543648 0.0038085250 -0.0079348543 0.0035370865 0.0147291341 0.0078662248 -0.0064247071 -0.0067735765 -0.0081276808 0.0012871269 0.0188462177 0.0020007810 -0.0020161486 0.0021014896 -0.0242195992 0.0059671326 -0.0108697930 0.0109877916 -0.0027502393 0.0369158542 -0.0255267926 0.0084336544 -0.0042216009 0.0210858080 0.0040700248 -0.0059887356 0.0151197767 -0.0042210022 -0.0040028954 -0.0017392989 -0.0015230634 0.0113317823 0.0146781773 -0.0110458628 -0.0001049995 -0.0148225190 -0.0075288847 -0.0189207789 0.0451409925 0.0385960393 -0.0510791032 0.0057986540 0.0319441777 -0.0026269042 0.0119174028 -0.0004598038 0.0025366731 -0.0032351731 0.0124294889 0.0349645833 -0.0152207338 -0.0378594245 0.0109874465 -0.0045079885 0.0075598796 -0.0213481833 -0.0124915659 0.0007477107 -0.0107241520 -0.0208848189 0.0058769548 -0.0374848363 -0.0449278992 0.0052078367 -0.0011189899 -0.0129214228 -0.0035766716 0.0178557430 0.0020291260 -0.0080945999 -0.0046653332 -0.0059934234 0.0047874288 0.0569910920 -0.0375309754 -0.0164163505 -0.0033008381 -0.0119455584 0.0136799962 -0.0275312584 0.0178865164 0.0086814826 0.0119690607 -0.0913162993 -0.0318375467 -0.0040383185 -0.0641673368 0.0305204706 0.0022969589 0.0269104386 -0.0004735733 -0.0010639898 0.0239500204 -0.0274864949 0.0049487488 -0.0371090485 0.0089105656 -0.0036782218 -0.0117886650 0.0132825958 -0.0205419041 0.0613333821 -0.0307456682 -0.0465797257 -0.0178179963 -0.0125260485 0.1591699768 -0.0479996942 -0.1409395335 0.0337585398 -0.0205692952 0.0193186696 0.0251581482 0.0228019069 0.0100187206 -0.0134611380 0.0030342450 -0.0043693280 -0.0087577609 -0.0067512111 0.0068170145 -0.0029581213 0.0041217000 -0.0116999020 0.0056911960 -0.0105955631 -0.0123774213 -0.1206083791 0.0648643440 -0.2046724431 0.0160980266 -0.0144239433 0.0218218486 0.0275690662 -0.0215107071 0.0444047316 0.0365517094 -0.0231398580 0.0667654772 -0.0019076214 0.0105912118 -0.0109886179 -0.0469576822 0.0287005699 -0.0678294440 -0.0303009864 0.0178616004 -0.0515132586 -0.2078933132 0.1004653996 -0.3454009791 0.0782061989 -0.0336917228 0.1317938753 0.2252524441 -0.1300932284 0.3399090670 -0.0094379186 -0.0009202703 -0.0118791659 0.0032870439 0.0102907807 0.0058599192 -0.0077788343 0.0190527621 0.0052073505 -0.0018383426 0.0024236202 -0.0022208219 -0.0003401702 0.0028880467 0.0014419996 0.0005590919 -0.0006260971 -0.0029335575 -0.0014209692 -0.0045502273 0.0050681698 -0.0020297824 -0.0067953965 0.0023444776 0.0043014283 0.0003674576 -0.0052471430 0.0077370024 -0.0024109936 0.0193079617 -0.0144791881 -0.0035554697 -0.0227835285 -0.0067761439 -0.0073931461 -0.0195089756 0.0121962726 -0.0066097023 0.0131885187 -0.0004806683 0.0040519913 -0.0026034378 0.0078557201 0.0014120994 0.0121259087 0.0103345943 -0.0280992265 0.0025159122 0.0162833487 -0.0568745224 0.0104406872 0.0022483673 -0.0212414207 -0.0004241658 -0.0066270524 -0.0206074931 -0.0099649182 -0.0269206730 -0.0062529898 0.0039353014 0.0057835430 -0.0025948253 0.0027717406 0.0005757392 0.0038805744 -0.0018206466 0.0034460909 0.0056880081 -0.0003399355 0.0029963872 0.0047594493 -0.0036124636 0.0166582943 0.0048541447 -0.0037120645 0.0021925127 0.0068130654 0.0031379415 -0.0041342642 -0.0005435400 0.0002748199 0.0017580885 -0.0039385670 0.0035970240 -0.0136747937 0.0105325030 -0.0037323177 -0.0062241441 -0.0025265150 -0.0132607656 0.0020333679 0.0029298377 -0.0188475270 -0.0056808743 -0.0125232993 0.0169126426 -0.0046954235 0.0010741630 0.0121744203 0.0001333692 0.0070029363 0.0181517878 -0.0020938765 -0.0227121794 -0.0165369367 -0.0138503429 0.0186264266 0.0145439136 -0.0062483307 -0.0294728897 -0.0137113233 -0.0131643713 0.0150045336 0.0168397805 0.0038636349 0.0233844266 -0.0178039379 -0.0033366747 -0.0231740458 0.0208853583 0.0039532409 -0.0163137462 0.0210935129 0.0016450371 0.0366775634 -0.0276726600 0.0018874191 -0.0235874696 0.0044685678 -0.0024042554 -0.0221777048 0.0134238505 0.0772646009 0.1297304501 -0.1191051528 0.0595743633 0.0976033831 -0.0923936193 -0.0201994717 -0.0270483095 0.0224081349 0.0603671360 0.0725353139 -0.0693516963 0.0637385755 0.0940693364 -0.1002298933 -0.0108634234 0.0513673137 -0.0085909475 0.0076213870 0.0362845260 -0.0165012192 0.0157209915 -0.0714558295 0.0103953956 -0.0054380168 0.0359699607 0.0096267264 -0.0144266596 0.0477368889 -0.0035687102 0.1540326642 -0.2356618016 0.0811268871 0.1236590016 -0.1664408343 0.0653401479 -0.0424947010 0.0420219835 -0.0372630148 0.1197444472 -0.1548888684 0.0620631175 0.1348627798 -0.2276011511 0.0817481596 0.0079412710 0.0140286939 0.0069184027 0.0029447715 -0.0000210141 -0.0171172552 0.0267781771 -0.0160705531 -0.0108241185 -0.0069802447 -0.0024683715 0.0343182713 0.0098019362 -0.0035687403 0.0035233745 0.0040437119 0.0194738570 -0.0196298634 -0.0048978844 0.0125031968 -0.0064309128 -0.0211110984 -0.0112468379 0.0088612849 0.0115210754 0.0145523635 0.0010936238 -0.0261804211 -0.0025906037 0.0051177187 -0.0024295183 0.0344994177 -0.0076890335 0.0163194536 -0.0162011777 0.0045146545 -0.0531142086 0.0350374147 -0.0147628959 0.0064712926 -0.0316127838 -0.0089717609 0.0142215754 -0.0192127518 0.0014758293 0.0010170078 0.0030460318 0.0004550700 -0.0206208874 -0.0114170377 0.0145363124 -0.0086268950 0.0170697384 0.0089883438 0.0621551742 -0.0668807366 -0.0668531020 0.0897686994 -0.0222124557 -0.0674370312 0.0116043466 -0.0165164941 -0.0006413305 0.0047025180 0.0020433435 -0.0091232795 -0.0761868975 0.0377454222 0.0701376139 -0.0208049878 0.0215800868 0.0091493240 0.0277688124 0.0154691438 -0.0068396661 -0.0035265670 0.0063793422 0.0028429900 0.0486837839 0.0544259017 -0.0046971888 0.0104094561 0.0234606802 0.0022010820 -0.0265812675 0.0016696438 0.0107164375 -0.0015219071 0.0151832239 -0.0019295992 -0.0650593125 0.0394890774 0.0180596123 0.0053962460 0.0077345650 -0.0037052996 -0.0065273107 0.0033113188 0.0019868447 0.0043247847 -0.0126959971 0.0079042292 -0.0023881875 -0.0134939304 0.0037449098 0.0042173053 0.0092250648 -0.0027978466 0.0045190408 0.0075169558 -0.0080479099 0.0115388187 -0.0129541323 0.0038498456 -0.0021732343 0.0058998700 0.0067974905 -0.0190542402 0.0138325437 -0.0137640890 -0.0240252049 -0.0057991425 -0.0066267770 0.0613805949 -0.0423904707 -0.0740925353 0.0140550628 -0.0093782528 0.0080256091 0.0085574208 0.0145862355 0.0097991028 -0.0077267379 -0.0033747844 -0.0030939364 -0.0053097976 -0.0013267209 0.0091268416 -0.0002013459 0.0057246653 -0.0127860586 0.0367204169 -0.1053131877 -0.0355371186 0.0135591874 -0.0474712562 0.0160852335 0.0111170686 -0.0245438280 -0.0196398122 -0.0059020108 -0.0088541250 -0.0212874851 -0.0403774056 -0.0078169696 0.0110563185 0.0181861454 0.0545862800 0.0084459791 0.0199915797 0.0242783558 0.0116622661 -0.0031344399 0.0043053429 0.0200767475 -0.0185682461 0.0177549430 0.0655855519 -0.0369010201 0.0799715303 0.0316332357 -0.0057576539 0.0540742033 -0.0265359239 -0.0075991698 -0.0757450363 -0.0057052841 0.0200555370 0.0697475042 -0.0067040241 0.0535965246 0.0294289732 0.2152494085 -0.0001212136 0.0124169772 0.0084957538 -0.0045199383 0.0205735480 0.0066066435 -0.0004102253 -0.0069026137 -0.0112035181 -0.0165220008 -0.0239928273 0.0094392867 -0.0138814980 -0.0374869149 0.0075439030 0.0231146442 0.0025114143 -0.0128331529 0.0131686753 -0.0090794368 0.0357670290 -0.0351561586 -0.0343955596 -0.0290144605 0.0043924052 -0.0587321382 -0.0566706797 0.0352103708 -0.0220325239 0.0143521698 0.0010720225 0.0303043354 -0.0156100672 0.0032168839 0.0057271164 -0.0035633831 0.0091248723 0.0050722824 0.0245328371 0.0090390313 -0.0317076062 0.0054927902 -0.0147146541 0.1227709612 -0.0007836774 0.0353404171 0.0901468717 0.0557508909 0.1415858072 0.0393758806 -0.0223718021 -0.0643976744 -0.0348844079 0.0198020921 0.0279710589 0.0192258081 -0.0237761026 0.0394326701 0.0177890089 -0.0097981335 0.0152154653 0.0182778586 -0.0212246427 -0.0811732011 -0.0230575922 0.0165161093 -0.0100487013 -0.0359387724 -0.0178854231 -0.0273029063 -0.0807526749 0.0387523237 0.0568314437 -0.1200728304 0.0545604141 -0.1467485878 0.1116742387 -0.0306710665 -0.0649765878 -0.0486331500 0.0045729835 -0.0027026692 0.0796032971 -0.1818072611 -0.0742368122 -0.0219913287 0.0505584148 -0.0373202520 -0.0105174171 0.0566835985 -0.0100154184 0.0455888833 0.0990926905 -0.0265055160 -0.1032416236 -0.0801291946 0.0677152027 -0.0904677450 -0.0696040318 0.0319648342 0.1392542139 0.0665038148 0.0631042625 -0.0747797476 -0.0832219600 -0.0043369724 -0.0040518522 0.0040559641 0.0037406870 0.0065473812 -0.0016517333 0.0055952911 0.0081471758 -0.0011111609 -0.0036027967 -0.0054081984 0.0047336997 0.0005196066 -0.0063685690 -0.0026899132 -0.0015479014 -0.0030996869 -0.0027662556 -0.0189283798 -0.0356899787 0.0378706874 -0.0079650369 -0.0388012915 0.0363915132 0.0035621215 0.0065415684 -0.0037227559 0.0129151918 0.0082284680 -0.0131847670 0.0002105425 0.0054183251 -0.0087022015 -0.0066933583 0.0264246022 -0.0012559230 0.0012220187 0.0213841686 -0.0076223092 0.0069491782 -0.0345791790 0.0046441135 -0.0015291373 0.0166293557 0.0036587792 -0.0040896318 0.0205602215 -0.0024017321 0.0767000634 -0.1188392992 0.0442989899 0.0687344820 -0.1020161041 0.0385209417 -0.0221462138 0.0177285905 -0.0177603319 0.0571054550 -0.0671734855 0.0262129532 0.0565458595 -0.0854975969 0.0339528548 -0.0007167157 -0.0026883753 -0.0003608567 -0.0004279176 -0.0006357415 0.0019701366 0.0148482725 -0.0083416029 -0.0072165282 -0.0041926647 0.0007181901 0.0185727695 0.0015048122 -0.0021378750 0.0026404341 0.0029077053 0.0037343595 -0.0030820560 -0.0006898222 -0.0012881415 0.0006588355 -0.0004613416 -0.0007419653 0.0006965609 -0.0033125944 -0.0025493814 -0.0024273296 -0.0003748987 -0.0003401130 0.0017016566 -0.0024728587 0.0054181879 -0.0014461118 -0.0020087389 -0.0007553639 -0.0005814300 -0.0079638690 0.0076743665 0.0028261075 -0.0045343829 -0.0035615779 0.0069763596 0.0100885161 -0.0024060258 -0.0051766892 -0.0030804363 -0.0016041924 -0.0035911256 -0.0074987920 0.0058293554 0.0011533355 -0.0102251732 0.0002198310 0.0000237152 0.0388885109 -0.0135929500 -0.0216358447 0.0370017860 -0.0175528191 -0.0380356148 0.0081963547 -0.0032716594 0.0021781719 0.0078959450 -0.0006473724 0.0085852292 -0.0295496005 0.0171974349 0.0280872671 0.0077370790 0.0142315154 0.0124077282 -0.1579896874 -0.0827662926 0.0204900306 -0.0167630586 -0.1003725648 0.0209562475 -0.2853410205 -0.3335307492 0.0462642513 0.0014894030 -0.0879694503 -0.0139463211 0.1370523825 0.0063616659 -0.0620874462 -0.0296975021 -0.0763754150 0.0227536121 0.3872406772 -0.2353252941 -0.1001302747 -0.0088396980 -0.0695177316 0.0650217500 0.0502976089 -0.0304897641 -0.0238017295 0.0788833047 0.0706825938 0.0782532807 0.0502527801 0.0306342445 -0.0287762288 -0.0139165216 -0.0009843653 -0.0306091721 -0.0082274933 0.0027620995 0.0461204734 0.0420228319 -0.0007130324 -0.0241524391 -0.0267213352 0.0481032803 0.0089295099 -0.0489093368 -0.0125928398 0.0031714607 -0.0196530990 0.0166833847 0.0000458233 0.1268704023 -0.1649166202 -0.1748285597 -0.0026479393 -0.0008643182 0.0164777555 -0.0282341985 -0.0406246133 -0.0195484708 0.0025459754 0.0125918945 0.0066292824 0.0066622618 0.0019826772 -0.0034851391 -0.0010638409 -0.0013379659 0.0024385830 -0.0264383195 0.0420256687 0.0011281504 0.0002509848 0.0114937395 0.0013221889 -0.0037602001 0.0071059614 0.0043328433 0.0002596245 0.0039008442 0.0040957725 0.0133116188 0.0017017679 -0.0044798576 -0.0053407429 -0.0175711277 -0.0015820135 -0.0066931315 -0.0086531927 -0.0026309811 0.0025567827 -0.0021709873 -0.0033000067 0.0053051458 -0.0069869023 -0.0241787787 0.0091735893 -0.0241088410 -0.0127441630 0.0001959272 -0.0181411999 0.0072540133 0.0042201018 0.0228835547 0.0047903216 -0.0067876903 -0.0229142455 -0.0012624484 -0.0072549308 -0.0194109352 -0.0578180252 0.0017452259 -0.0049573890 -0.0000080397 0.0012796843 -0.0064604855 -0.0016382518 -0.0015025130 0.0030121682 -0.0004637512 0.0059796478 0.0076694908 -0.0015728122 0.0062646596 0.0120819118 0.0006534608 -0.0096494005 -0.0003943139 0.0029208735 0.0051571016 -0.0005496978 0.0072313825 0.0039376018 0.0186766931 -0.0062130392 -0.0039945165 0.0182080787 -0.0043491521 -0.0062325112 0.0042778951 0.0119560032 -0.0026626945 -0.0086231497 -0.0000944484 -0.0010528194 0.0006516101 0.0010715901 -0.0037709277 -0.0097934834 -0.0015300256 0.0330112766 -0.0557221690 0.0165321067 0.0014613139 -0.0107707909 0.0020762734 -0.0030238323 -0.0030647690 -0.0043577847 -0.0121142518 -0.0027404595 0.0004541281 0.0155645055 -0.0087666301 0.0072002258 -0.0103988951 -0.0003654746 -0.0038424105 -0.0160509083 0.0115634399 -0.0020192532 -0.0102488675 0.0098528956 -0.0081147100 0.0063179710 0.0014286982 -0.0011424489 0.0008104262 0.0022145751 0.0012151071 0.0158002483 -0.0001560525 0.0008221710 -0.0300758479 0.0474205562 -0.0040187738 0.0069853978 0.0097454506 0.0103342089 0.0411304259 0.0408763038 -0.0887461700 0.0069701845 -0.0445542510 0.0433399924 0.0346418159 -0.0185855682 0.0084359820 0.0071195493 0.0411260637 0.0578440786 0.0112893073 -0.0327227200 -0.0024141129 0.0209754513 -0.0379199125 -0.0215435654 -0.0041620293 0.0051825157 0.0039713535 -0.0021659371 -0.0105657059 -0.0048398469 -0.0040337816 0.0048108611 0.0055748776 -0.0228645352 -0.0764798427 0.0628362640 0.0105257806 0.0594675932 -0.0434228490 -0.0015734138 0.0420086874 -0.0400584021 -0.0055181064 -0.0796383023 0.0621000968 -0.0011208162 0.0488090915 -0.0211935629 0.0053193724 0.0483506451 -0.0451646917 -0.1736981163 -0.2719268761 0.2577672221 -0.1280579999 -0.2477036922 0.2335855766 0.0488879830 0.0566528578 -0.0487079938 -0.1385331604 -0.2151364946 0.1891463235 -0.1511770886 -0.2250921818 0.2215901046 -0.0211276805 0.0402466131 -0.0079698435 -0.0112584929 0.0247855739 -0.0069398620 0.0229720704 -0.0468252515 0.0107241602 -0.0099199008 0.0219112575 -0.0066261424 -0.0207602449 0.0335171237 -0.0028312462 0.1066393175 -0.2063863661 0.0710165973 0.0799353258 -0.1789962254 0.0455192146 -0.0118961996 0.0397585350 -0.0187827990 0.0798710560 -0.1478518333 0.0418732548 0.0835862650 -0.1683913761 0.0533870049 -0.0190361875 -0.0328388485 -0.0200546838 -0.0062543549 0.0033257420 0.0414848044 0.0030946160 -0.0068796267 0.0090080509 -0.0001129414 -0.0112455042 0.0034936411 0.0115016453 -0.0016034537 0.0042978778 -0.0026368099 0.0064537668 0.0081966776 -0.0144747350 -0.0118303069 -0.0016264695 -0.0249622355 -0.0059041156 -0.0020330699 -0.0136554710 0.0038921384 0.0414938256 -0.0315449729 0.0412539524 0.0421394728 0.0051720435 0.0079986570 0.0005275040 0.0111216435 -0.0009645476 0.0013394693 -0.0077342350 -0.0049020971 -0.0351295031 0.0199063154 0.0114143743 -0.0138888188 0.0365908086 -0.0016616570 -0.0348911176 -0.0207730453 -0.0093470739 -0.0000063567 -0.0177496812 0.0331884096 0.0044696418 -0.0248020482 -0.0024469391 0.0047944250 0.1287266068 -0.0132842477 -0.0401515146 0.1138072817 -0.0683736013 -0.0838085054 0.0246882333 -0.0099331974 -0.0007597158 0.0181157055 -0.0029632346 0.0197875921 -0.0877862439 0.0537770564 0.0808655398 0.0008527869 0.0378204785 0.0389596409 0.0143501245 0.0069106387 -0.0001008144 0.0060265163 0.0163899774 -0.0065292898 0.0255811330 0.0308772295 -0.0091488135 -0.0088573946 -0.0012880232 -0.0016612989 -0.0109064860 -0.0012002655 0.0063291664 0.0122266016 -0.0006887970 -0.0096900557 -0.0406717960 0.0243292396 0.0063181786 -0.0005332694 0.0081776453 -0.0081468800 0.0054522513 -0.0107355374 -0.0039456923 -0.0237751969 -0.0302655031 -0.0909425903 0.0004139967 0.0078628936 0.0107299051 -0.0051827429 -0.0062415909 0.0016953596 0.0009428004 -0.0052659329 0.0040075349 0.0160813424 -0.0059258626 -0.0144733696 -0.0259470122 0.0154500050 0.0205724075 -0.0149905067 -0.0009680186 0.0168807096 0.0088619622 0.0021962869 -0.0017668861 0.1420026246 -0.1134790897 -0.1052338778 -0.0116948121 0.0063967218 -0.0002632216 0.0057552412 0.0010801310 -0.0006446999 0.0003612072 -0.0035436197 0.0009641332 0.0054157568 0.0027455076 -0.0008733488 0.0014963068 -0.0003856462 -0.0017494877 0.0552447110 -0.0779804110 0.0119645846 0.0059658773 -0.0074075406 0.0125267235 -0.0009473259 -0.0020348493 -0.0021530409 0.0031949525 -0.0050144270 -0.0122126984 -0.0182308247 0.0017862419 0.0049248218 0.0051309249 0.0192656291 0.0037132961 0.0230604559 0.0154360627 0.0010673797 -0.0014909923 -0.0024822971 0.0074956540 -0.0028009368 0.0071667321 0.0383776021 -0.0226471258 0.0324834040 0.0128804347 0.0013806699 0.0568496866 -0.0227628525 -0.0081022693 -0.0371552203 -0.0088972295 0.0097097721 0.0505379060 0.0078601635 -0.0125001875 0.0652406156 0.0838508076 -0.0042748908 0.0118364000 -0.0004273915 -0.0035346140 0.0134061814 0.0024765969 0.0068678153 -0.0054682914 0.0033293822 -0.0168049877 -0.0167416646 -0.0018750707 -0.0142594587 -0.0283794631 -0.0028559856 0.0226472424 -0.0006292134 -0.0051121969 -0.0139352292 0.0041056483 -0.0341024830 0.0037250822 -0.0363650729 0.0444983063 0.0270117241 -0.0507247588 0.0205244206 0.0093363859 -0.0131336031 -0.0391412671 0.0079713517 0.0168958758 0.0067832265 -0.0044346658 -0.0047545248 -0.0030917674 0.0000183208 -0.0071840631 0.0124569056 -0.0019025161 0.0131699992 -0.0021035010 -0.0003363275 -0.0075078009 -0.0038524669 0.0006081976 -0.0145217639 -0.0033136287 -0.0017451527 -0.0080379031 0.0047184008 -0.0293100088 0.0864086170 -0.0276173704 0.0249936909 -0.0396999462 0.0063006219 0.0342284319 -0.0949157812 0.0018183476 0.0178941126 -0.0695115176 0.0437505367 0.0012011775 0.0023029053 0.0001384663 0.0003675080 0.0035775203 0.0014696881 0.0744522417 -0.0587132147 0.0305992856 0.0253538488 -0.0371871083 0.0177599312 0.0827983631 -0.0681418033 0.0169076021 -0.0962379368 -0.1320655123 0.4634176416 -0.0362695898 0.1498314532 0.0224486296 -0.0735548501 0.1956356266 -0.2025311671 0.0090350888 -0.1589343120 -0.2973240563 -0.0297867344 0.0478574168 -0.1265597804 -0.0519860646 0.2468883987 0.1599221529 -0.0072355705 0.0100303284 0.0072303907 -0.0016249853 -0.0025179295 -0.0020633963 -0.0055735517 0.0050700551 0.0070715740 0.0059870802 -0.0008281576 -0.0018548925 -0.0020190475 0.0013071062 0.0025870940 -0.0043494598 -0.0026998881 0.0001500670 0.0036953964 0.0011927144 -0.0027475287 -0.0043781541 0.0043837941 0.0025087564 -0.0023367576 0.0027436930 0.0003402850 0.0008265309 0.0109223578 -0.0073180584 -0.0013084501 0.0161810850 -0.0123412910 0.0080101023 -0.0019953243 -0.0016312494 -0.0168666830 -0.0007091341 0.0033021408 -0.0067030058 0.0004433572 0.0060237641 -0.0006424279 -0.0079531404 -0.0019674265 -0.0037031199 -0.0048233352 -0.0008304379 -0.0008537306 0.0086325705 -0.0016865915 0.0011850000 -0.0054795704 0.0018449990 -0.0009868357 -0.0080209191 0.0064367828 -0.0188666193 0.0173009695 -0.0098571924 -0.0156613479 0.0127002495 -0.0104120843 0.0115084132 -0.0017986823 0.0071275025 -0.0177165804 0.0366349128 -0.0102917655 -0.0256875759 0.0312458958 -0.0091839422 -0.0043222170 -0.0030462329 -0.0070631099 0.0003311860 0.0049781295 0.0077495119 -0.0078507697 0.0035451683 0.0070274531 0.0025797630 -0.0027897545 -0.0103110991 0.0001456408 0.0071856764 0.0086221161 -0.0062512854 -0.0082607006 -0.0141747564 -0.0024118609 -0.0034909730 -0.0220415009 -0.0023733764 -0.0031759940 -0.0096122040 0.0229119225 0.0501883313 0.1127469570 0.0081638163 0.0214996909 0.0530774105 0.0050951597 0.0053303588 0.0187554763 0.0074913840 0.0042859806 0.0181754606 -0.0252651751 -0.0401198089 -0.1029161195 -0.0138013187 -0.0413570071 -0.1147355976 0.0503099399 -0.0224433569 -0.0308826351 -0.0307892665 0.0169932669 0.0200487457 -0.0405075442 0.0233367358 0.0234384745 -0.0294024153 0.0071338904 0.0144425034 0.1990779227 -0.0821102551 -0.1051882049 0.1846477915 -0.0976679299 -0.1198788981 0.0389999938 -0.0147151575 -0.0280795377 0.0164195100 -0.0073022182 -0.0074228013 -0.1900152871 0.1083751480 0.1188735662 -0.1049017464 0.0564241942 0.0709964087 0.0059554428 0.0051253904 -0.0050816072 -0.0067946702 -0.0135614810 0.0104819500 0.0103349363 0.0091817111 0.0104825302 0.0245534717 0.0270822283 0.0075179582 -0.0102276344 -0.0007848936 -0.0017685315 -0.0210182509 0.0278680433 0.0161689987 -0.0042084001 0.0118873634 0.0217723844 0.0133679448 -0.0085763618 0.0040470130 -0.0032682320 -0.0097682239 0.0004553063 -0.0652017472 -0.0632195298 -0.1694142362 -0.0142176558 0.0088262135 0.0234747451 -0.0016505488 -0.0118546379 0.0136048194 0.0079830535 -0.0115817154 -0.0070672489 0.0126443931 -0.0065142429 -0.0176109302 -0.0335293388 0.0114069235 0.0287623022 -0.0103536168 -0.0027924197 0.0292005777 0.0226807246 -0.0001120075 -0.0024982564 0.1814715154 -0.1347701093 -0.1111880041 -0.0207668852 0.0134251647 -0.0072534238 0.0120461921 0.0149372818 0.0032242848 0.0051269524 -0.0089816959 -0.0045562209 -0.0003158798 0.0000304715 -0.0029465188 0.0003927712 -0.0011265675 0.0051292009 -0.0341514264 0.0570820915 0.0028755273 0.0000665949 0.0030045690 0.0008615798 -0.0003596587 0.0032155097 0.0014906715 -0.0036452051 0.0056641445 0.0077059538 0.0126440781 0.0004514546 -0.0078741377 -0.0052539506 -0.0160763467 -0.0036375015 -0.0136712400 -0.0135962129 0.0033544112 0.0022745585 0.0007605263 -0.0037610685 0.0155165168 -0.0096797530 -0.0081353960 0.0158479631 -0.0259622325 -0.0131990986 -0.0164016744 -0.0344242255 -0.0074580267 0.0057477722 0.0302658382 0.0071979851 -0.0076075320 -0.0410010895 -0.0057968892 0.0119596473 -0.0542662688 -0.0653512860 0.0032215179 -0.0097642178 -0.0003142553 0.0022872715 -0.0104978664 -0.0025763205 -0.0040577113 0.0040543855 0.0002129273 0.0125412870 0.0136797335 -0.0010954099 0.0104636494 0.0231175163 0.0000677851 -0.0173408706 0.0002619363 0.0062713643 0.0039706736 -0.0005557483 0.0098541120 0.0061811898 0.0269726242 -0.0164701165 -0.0139052788 0.0386006766 0.0003120133 -0.0135891377 0.0121485783 0.0169187242 -0.0045018431 -0.0140775381 -0.0002791645 0.0021838569 0.0021456755 0.0009182003 0.0003922867 0.0080301737 0.0041977567 -0.0126100317 0.0401728276 -0.0083362722 0.0000994174 0.0092887784 0.0034668144 -0.0003679975 0.0133312208 0.0042761616 0.0058718119 0.0057943378 -0.0031932983 0.0125711318 -0.0547661113 0.0133853819 -0.0121019991 0.0279294595 0.0001618866 -0.0165220217 0.0595238052 0.0008553822 -0.0065002125 0.0422059609 -0.0244917231 -0.0026563856 -0.0021301752 0.0001696624 -0.0004120686 -0.0040168677 -0.0018713809 -0.0648930763 0.0474946582 -0.0249354972 0.0010818987 -0.0017804330 -0.0135242170 -0.0553984440 0.0345830716 -0.0178354218 0.0466141416 0.0715730549 -0.2748421644 0.0219257936 -0.0845047432 -0.0334812249 0.0343479736 -0.1277632652 0.1376759883 -0.0097603566 0.0859777321 0.1704558151 0.0139738521 -0.0136843372 0.0880371351 0.0243622821 -0.1445318638 -0.0949971968 0.0068684026 -0.0102896597 -0.0076818263 0.0020556623 0.0051192265 0.0025358365 0.0058763522 -0.0067443900 -0.0077483134 0.0169810357 0.0185974182 -0.0202626334 -0.0072400665 -0.0058394470 0.0209694863 -0.0035796114 -0.0070388868 0.0098679580 0.0085506647 0.0128807174 -0.0138646317 -0.0080006131 -0.0083231493 0.0062461903 -0.0129278070 -0.0134283903 0.0078433159 0.0283624213 0.0786296106 -0.0588104553 0.0243535408 0.0638009801 -0.0531485873 0.0120791081 -0.0203832643 0.0095874730 0.0167960801 0.0659752466 -0.0585818177 0.0199916107 0.0726563363 -0.0600649234 0.0071733922 -0.0293275375 0.0001800504 -0.0007796554 -0.0218083623 0.0028183653 -0.0077488467 0.0327022193 -0.0059929916 0.0035151675 -0.0149259312 0.0040147499 0.0024585919 -0.0219700376 0.0111232736 -0.0792532775 0.1235637677 -0.0481604104 -0.0744575674 0.1122855655 -0.0481640914 0.0248050861 -0.0158017867 0.0186404543 -0.0520728983 0.0918071911 -0.0261489251 -0.0637211866 0.0897924363 -0.0290650912 -0.0076723620 -0.0025773967 -0.0148957577 0.0012313309 0.0128116957 0.0117784648 -0.0163549838 0.0089537577 0.0103682353 0.0052074636 -0.0020014654 -0.0210094393 -0.0039952266 0.0124646588 0.0131854827 -0.0083817352 -0.0169887390 -0.0255243809 0.0003711594 -0.0048340462 -0.0344120662 0.0059588981 -0.0025393342 -0.0156183283 0.0386089916 0.0777516837 0.1718530417 0.0256839106 0.0221311037 0.0734859538 0.0058784283 0.0043754519 0.0311057641 0.0056589457 0.0097084114 0.0285963184 -0.0346309936 -0.0656420402 -0.1553879074 -0.0320082444 -0.0686140252 -0.1818270921 0.0672905968 -0.0327710071 -0.0393414516 -0.0419188032 0.0285436552 0.0301367827 -0.0568223077 0.0295011444 0.0340744575 -0.0390322068 0.0100559578 0.0206093761 0.2742822214 -0.1191275328 -0.1490531527 0.2505383825 -0.1328517050 -0.1597582738 0.0535361168 -0.0180316455 -0.0438553899 0.0213044736 -0.0114025083 -0.0152923365 -0.2694961792 0.1535591060 0.1586572645 -0.1634826873 0.0759419944 0.1016709928 -0.0088186405 -0.0062147122 0.0048396850 0.0057321311 0.0091651065 -0.0082864879 -0.0154881096 -0.0155524224 -0.0073541175 -0.0198413563 -0.0242180316 -0.0063229522 0.0117772993 0.0007684947 -0.0002603739 0.0153359776 -0.0218314725 -0.0109372303 0.0160543484 -0.0175357162 -0.0197603488 -0.0152904128 0.0057837127 -0.0016688344 0.0029561600 -0.0035249711 -0.0013059244 -0.0100433639 -0.0021447911 -0.0295471680 -0.0007362537 0.0089297904 0.0008500270 0.0014548400 -0.0039184462 0.0023753765 0.0019076554 -0.0050487193 0.0017928289 0.0024737672 0.0042762770 -0.0030969159 -0.0014599844 0.0037273535 0.0029883637 0.0001811187 -0.0064161026 0.0064643683 0.0059838627 0.0018478013 0.0012008118 0.0048671910 -0.0105428155 0.0019209192 -0.0055998249 0.0024832237 -0.0030920508 -0.0030935104 -0.0002077407 -0.0006709665 0.0007299388 -0.0006450184 -0.0004770019 -0.0002141491 0.0002740904 -0.0008415007 0.0026314055 0.0000399200 -0.0008552280 0.0659225326 -0.1965724887 -0.1072501250 0.0132718068 -0.0456653078 0.0207134808 0.0074469265 -0.0242665127 -0.0177624101 0.0054078099 -0.0234173761 -0.0360877513 -0.0659947693 -0.0018457849 0.0246865177 0.0261040321 0.0808363664 0.0135001051 0.0514641302 0.0507585715 0.0056760796 -0.0065884769 0.0013721160 0.0235485801 -0.0318744870 0.0351954260 0.1104456471 -0.0648706984 0.1232252800 0.0535302432 0.0172471048 0.1440419622 -0.0260062616 -0.0152063880 -0.1354791899 -0.0239386659 0.0315043656 0.1598080265 0.0130296331 -0.0254177366 0.1912795518 0.3012078041 -0.0084669104 0.0383660591 0.0061318580 -0.0065684067 0.0398368115 0.0128198033 0.0071413171 -0.0130831211 -0.0160501675 -0.0430683468 -0.0534296454 0.0192517176 -0.0338558966 -0.0879699186 0.0123528293 0.0586168431 0.0007226982 -0.0338970065 0.0208830777 -0.0114004596 0.0533550946 -0.0744699471 -0.0968948500 -0.0418954249 0.0172242441 -0.1372634363 -0.0951890606 0.0811758879 -0.0563513518 0.0146899294 0.0075640911 0.0580786332 -0.0251591376 -0.0016183250 -0.0039919301 -0.0062894342 0.0049155734 -0.0105881083 0.0574155079 -0.0033621636 0.0058505132 -0.0015625674 -0.0010537144 -0.0374261841 -0.0224323054 0.0035182304 -0.0527090729 -0.0215274646 -0.0449387756 -0.0004428379 0.0011647219 0.0594595019 -0.0152105236 0.0544651528 -0.0347747032 -0.0218308401 -0.0563368612 -0.0446912610 0.0209357300 -0.0264363194 -0.0508797108 0.0333711938 -0.0442349499 0.0156512151 0.0065818580 -0.0025361507 0.0011025277 0.0207731538 0.0110760182 0.1869342099 -0.1383845382 0.0734092585 -0.1801382865 0.2558849213 0.0430614382 -0.0360600683 0.1584435487 0.0754969112 0.1151523292 0.1113538634 -0.2059440366 0.0141377075 -0.0948248562 0.1386190075 0.1130322413 0.0197758081 -0.0689744062 0.0337306257 0.1752514530 0.2401192262 0.0552420746 -0.1758825579 -0.0507409027 0.0908935069 -0.1820404864 -0.1063037905 -0.0243202032 0.0454886371 0.0361183339 -0.0106347720 -0.0322569744 -0.0091332652 -0.0245670015 0.0391912252 0.0349074377 0.0015700252 0.0003007933 -0.0010757851 -0.0010126654 0.0020346502 0.0009843231 -0.0002981091 0.0017206068 -0.0014894781 0.0019235467 -0.0042166347 0.0021724889 -0.0011606134 0.0023997264 -0.0004446995 -0.0018785936 0.0010322772 -0.0008658678 -0.0065323460 -0.0028789235 0.0046309988 -0.0046466250 -0.0040112894 0.0060545677 0.0044290344 -0.0001077868 -0.0007696843 -0.0088345838 -0.0028417531 0.0018358813 -0.0066573075 -0.0043210337 0.0062190287 0.0010333897 -0.0036665481 0.0070418198 -0.0005706433 -0.0066026890 0.0062712127 -0.0027364982 0.0087368850 -0.0017454679 0.0020789709 -0.0035152566 -0.0052849990 0.0049908188 -0.0045762648 -0.0036407874 -0.0170334261 0.0355516028 -0.0050818390 -0.0224244466 0.0319572369 -0.0085499351 -0.0026497663 -0.0100550307 0.0018320850 -0.0089258242 0.0110937452 -0.0094368834 -0.0082477114 0.0278703005 -0.0092556179 -0.0024687505 -0.0023047347 -0.0037289515 -0.0002455823 0.0024908604 0.0044704872 0.0028988726 0.0001825224 -0.0051457428 -0.0016721477 0.0041694219 0.0037669088 -0.0014449760 0.0021140438 0.0027794002 -0.0010336742 -0.0047985649 -0.0038389076 -0.0001613069 -0.0041971697 -0.0052636972 0.0033446043 0.0008400651 -0.0040431611 0.0036974914 0.0117067822 0.0343300776 0.0072839786 0.0058001841 0.0140371679 0.0008409565 -0.0022421852 0.0068533898 -0.0018008421 0.0043777029 0.0048558582 -0.0021925005 -0.0159564666 -0.0290619436 -0.0084708057 -0.0096083821 -0.0339182137 0.0049663380 -0.0008726190 -0.0028665967 -0.0033503459 0.0022189896 0.0019748267 -0.0033685743 0.0036906985 0.0009641295 -0.0036389478 -0.0019813425 0.0001501957 0.0173858257 -0.0038154507 -0.0068933271 0.0113251194 -0.0097442208 -0.0086426719 0.0036751570 0.0013688627 -0.0045145996 0.0020152893 -0.0014017689 0.0003806954 -0.0176579023 0.0111686240 0.0058040903 -0.0121446560 0.0047968455 0.0091558430 0.0390147230 0.0214170585 -0.0204989108 -0.0469585879 -0.0435067564 0.0356148790 0.0789855963 0.0846826312 0.0300319196 0.0618554958 0.0976661973 0.0318154010 -0.0463642712 0.0010097436 0.0076049095 -0.0629402684 0.0668740343 0.0456212942 -0.0785230998 0.0653722652 0.0575647735 0.0612677426 -0.0122509632 0.0037648221 -0.0003160241 -0.0083295580 -0.0146570718 -0.0491720654 -0.1356480011 -0.4046055119 0.0025630240 0.0342954245 0.0412797540 0.0110508957 0.0270215455 0.0481087988 -0.0024572303 -0.0156764172 -0.0286458655 -0.0101406061 0.0125305717 0.0059773210 0.0335627900 -0.0087854664 -0.0129825821 0.0016501958 -0.0186564081 -0.0054318666 -0.0108468029 -0.0043721144 0.0038156723 -0.1070778018 0.0598000768 0.0816099783 -0.0063890297 0.0003736098 -0.0089339019 -0.0067540359 0.0002692910 0.0051592183 0.0021708800 -0.0002403269 0.0006732412 0.0017046649 0.0005254091 -0.0009621982 0.0006497314 -0.0011498069 0.0005003610 -0.0004550926 0.0021259451 0.0008086170 0.0003443049 0.0032354207 -0.0005409698 -0.0008269241 0.0013329286 0.0010244817 0.0009461685 0.0000537220 0.0008293270 0.0016380127 0.0001456759 0.0004197257 -0.0004039070 -0.0024122253 0.0003567499 -0.0007000176 0.0002529252 -0.0025780266 0.0002543782 -0.0002716293 -0.0008168298 -0.0021324308 0.0002883390 -0.0066256111 0.0005318833 -0.0028486269 -0.0006170545 0.0074319470 -0.0028196048 0.0104698123 -0.0001171280 0.0018932457 0.0002631031 -0.0007977354 -0.0005859882 0.0005605895 -0.0030560934 0.0016329775 -0.0055029985 -0.0001613162 0.0000419480 -0.0002373769 -0.0001051483 -0.0001251948 -0.0001637226 0.0006061810 0.0001592302 0.0005211637 -0.0001397713 0.0000775885 -0.0003711780 -0.0001718787 0.0000778543 -0.0004659987 0.0002813720 -0.0001600458 0.0003582728 -0.0008969752 0.0006417215 -0.0036901084 0.0013285944 0.0000047941 0.0028747312 0.0016586092 -0.0005070100 0.0029935134 -0.0011794451 -0.0000998067 -0.0031952744 0.0001873742 -0.0004023583 0.0010184837 -0.0008005354 -0.0006609696 -0.0002036280 0.0000137328 -0.0017293832 0.0067601317 0.0004879741 -0.0206358767 0.0018353607 0.0000200275 0.0006054341 0.0005257316 -0.0000999135 0.0013184867 0.0004826079 0.0004709246 -0.0001050892 0.0004831701 -0.0004137782 -0.0001017916 -0.0076226162 -0.0007884436 0.0028380579 0.0093518546 -0.0015972905 0.0006546236 0.0043000325 0.0023319202 -0.0024309961 0.0054348225 -0.0000783885 -0.0002070511 -0.0000453179 -0.0000466230 -0.0003070980 -0.0001885414 -0.0244338004 0.0298723340 -0.0151512627 0.0142916174 -0.0160839592 -0.0135357271 0.0173788450 -0.0302130511 -0.0074461538 0.0002816188 0.0005655692 -0.0044644542 0.0008342115 -0.0077966060 0.0055737759 -0.0001764916 -0.0101943614 0.0129928725 0.0004945408 -0.0090195270 -0.0171370718 -0.0036014159 0.0109364786 -0.0005571340 -0.0039699185 0.0215839567 0.0145237003 0.0005875992 -0.0008755394 -0.0007031243 0.0000123268 0.0003674210 -0.0001974724 0.0005886329 -0.0006818833 -0.0008386334 -0.0037157510 -0.0105836553 0.0072364724 0.0042632811 0.0087398617 0.0006657554 0.0047803376 0.0034882543 -0.0016226860 -0.0015500234 -0.0088843023 0.0051152402 -0.0023203363 0.0073701201 -0.0035269758 0.0007981238 0.0087015875 -0.0022565175 -0.0116013992 -0.0211524024 0.0285493809 0.0000650214 -0.0306237059 0.0200448720 0.0050726166 0.0059777580 -0.0048012077 -0.0278718477 -0.0300554889 0.0241862151 -0.0188320210 -0.0238726818 0.0304728598 -0.0015242332 0.0155182096 0.0137278383 0.0005156202 0.0109929312 0.0057446974 -0.0009946622 -0.0154913550 0.0011816274 0.0030236811 0.0067102307 -0.0070356028 0.0092008037 0.0116022141 -0.0147092811 0.0415832089 -0.0365438597 0.0297625581 0.0309054046 -0.0444937332 0.0276641233 -0.0290646332 -0.0035832154 -0.0147473657 0.0266778965 -0.0408042326 0.0058530007 0.0425953452 -0.0281066657 0.0095521973 -0.0021387979 -0.0029977154 -0.0016307717 -0.0001021947 0.0004631060 0.0045148850 0.0217894747 -0.0083611456 -0.0212229786 -0.0082770258 0.0103790451 0.0287676033 -0.0009567087 0.0157204597 0.0484248589 -0.0143318046 -0.0393216426 -0.0832227814 -0.0097810936 -0.0394527050 -0.0721994189 0.0130749745 0.0022495736 -0.0371031508 0.0463960764 0.1556929179 0.4157249225 0.0468027883 0.0815575293 0.1646369117 0.0127724438 0.0094364381 0.0768911800 0.0035323001 0.0309363527 0.0643778096 -0.0895456892 -0.1559092989 -0.3677165155 -0.0863417256 -0.1549828459 -0.4371050663 -0.0352014319 0.0243953665 0.0239250294 0.0193732371 -0.0129894596 -0.0205329606 0.0288124468 -0.0016241908 -0.0238492865 0.0095242620 -0.0176578770 -0.0154639668 -0.1227864558 0.0742474645 0.0759577057 -0.1374859768 0.0560287413 0.0742500520 -0.0228107487 0.0224770319 0.0148504833 -0.0015498551 0.0002075512 0.0212932658 0.1206600159 -0.0635704352 -0.0937484567 0.0782698166 -0.0358383064 -0.0289020492 -0.0006153766 -0.0003751206 0.0004834331 0.0011508979 0.0012643693 -0.0009181914 -0.0013995102 -0.0015072791 -0.0009449008 -0.0015461583 -0.0021782588 -0.0006622603 0.0009098958 -0.0001308715 0.0003057142 0.0027216114 -0.0028991009 -0.0021647009 0.0001199039 -0.0010269909 -0.0017298895 -0.0002395718 0.0011811083 -0.0011146563 -0.0059644677 -0.0073463378 0.0101837673 -0.0890096976 0.0068003408 -0.0626105414 -0.0328438712 0.0278086203 0.0022635275 0.0021442340 -0.0048450050 0.0158139098 0.0013749330 -0.0178627227 -0.0073434937 0.0041304391 0.0058611674 -0.0057242825 0.0055825492 0.0018494562 -0.0089981068 -0.0287244605 -0.0321937297 -0.0106460673 -0.0112703189 0.0135199728 -0.0034468570 -0.0764970972 -0.0331678352 -0.0292046549 -0.0002040844 -0.0008345974 0.0091777918 0.0081512986 0.0140549145 0.0056546088 -0.0006687481 -0.0060444511 -0.0017863533 0.0040320332 0.0078347530 -0.0045808047 -0.0020679192 -0.0010733752 0.0026266401 -0.0232343264 0.0624023127 0.0379158287 -0.0056499244 0.0124882347 -0.0067194302 -0.0020083338 0.0072162691 0.0050130815 -0.0026361595 0.0086019940 0.0101568599 0.0207895534 0.0005876369 -0.0082101018 -0.0089851559 -0.0246527480 -0.0047721388 -0.0137754673 -0.0162517408 0.0009825536 0.0013007683 -0.0000346518 -0.0074440244 0.0111063714 -0.0087661519 -0.0322558057 0.0189761712 -0.0377073187 -0.0160765708 -0.0144762126 -0.0403392748 -0.0068647999 0.0037531048 0.0416577813 0.0084815127 -0.0073007294 -0.0508062200 -0.0051788895 0.0300655793 -0.0787177771 -0.0661244221 0.0040202897 -0.0142863899 -0.0007273961 0.0024995769 -0.0121169159 -0.0020467105 -0.0054832062 0.0041518282 -0.0001550376 0.0145871862 0.0172795720 -0.0058394906 0.0134872392 0.0282542039 0.0008549784 -0.0213320245 0.0005567497 0.0080562424 0.0043755639 -0.0012346134 0.0150208303 0.0190418153 0.0402973350 0.0021398162 -0.0134665132 0.0455018799 -0.0020764364 -0.0174323586 0.0150005918 0.0196787634 -0.0085843565 -0.0161617309 -0.0037274939 -0.0000014539 0.0004028630 0.0014742222 0.0005060996 0.0021059309 0.0063960183 0.0320357444 -0.0210410262 0.0140277686 0.0002540207 -0.0028306791 0.0037691023 -0.0024186912 -0.0030670211 -0.0015204160 0.0015004362 -0.0033359678 -0.0057275959 -0.0170505526 0.0249111292 0.0816736487 0.0259295960 -0.0403323811 -0.1063761863 0.0405300484 -0.0350146225 -0.0515840147 -0.0117755402 0.0077735391 -0.0510864953 0.0008980351 0.0026694796 0.0006997937 0.0012519516 -0.0021404731 -0.0015454304 0.2896293775 -0.3722563287 0.1873393939 -0.1367366145 0.1397199338 0.1747205703 -0.2035158281 0.3446366550 0.0836326263 -0.0519939872 -0.0628629820 0.2153892155 -0.0200578325 0.1548701802 -0.1023456968 -0.0417905787 0.1722582804 -0.2006485539 -0.0155137404 0.0330117859 0.0926621856 0.0259327785 -0.0841830450 -0.0039063259 0.0152511008 -0.1833410502 -0.1300852185 -0.0041023291 0.0005777941 0.0000910152 0.0020947841 -0.0034679777 0.0006538382 -0.0032510924 -0.0025481799 0.0034777845 0.0297710986 0.0204892060 -0.0255363353 -0.0127254037 0.0127572936 0.0444203391 -0.0024966119 0.0031705878 0.0260038103 0.0159744705 0.0088519905 -0.0129793791 -0.0136794774 -0.0213532681 -0.0074070312 -0.0318887357 -0.0273515942 -0.0135767528 0.0057180866 0.1081963581 -0.0510956447 0.0314902607 0.0886712309 -0.0483930270 0.0573359313 -0.0294986563 0.0015268691 0.0198712303 0.0629537853 -0.0810403972 -0.0146171468 0.0746462775 -0.0744185845 -0.0095374073 0.0046903727 -0.0561648272 0.0044664982 0.0052180156 -0.0308835530 0.0215330646 -0.0077189840 0.0080310097 -0.0191958632 0.0087473989 0.0231856124 -0.0457788280 0.0072463833 0.0381370999 0.0014612175 -0.1166433155 -0.0158240789 0.0487856672 -0.0761277864 -0.0045188030 0.0622014512 0.0481825783 0.0187075087 0.0229821901 -0.0577542716 0.0441137245 -0.0284252633 -0.0897625429 0.0325626516 -0.0300651445 -0.0234324319 -0.0533054854 0.0011496119 0.0379809672 0.0535238555 -0.0526479993 0.0144459334 0.0624355889 0.0216337286 -0.0372372598 -0.0703342503 -0.0174844974 0.0066372474 -0.0018262672 -0.0029669702 -0.0193120593 0.0029276797 0.0100432225 -0.0083909538 0.0001440063 0.0332851776 0.0127220235 -0.0095972823 0.0029374464 -0.0001114801 0.0166764463 0.0425215482 -0.0103486141 -0.0142147115 0.0013978022 -0.0325140452 0.0136012258 -0.0167835365 0.0147946730 0.0017421835 0.0388712997 -0.0404280410 -0.0005277009 -0.0216072356 0.0034777838 -0.0249885543 -0.0131793241 0.0245045949 -0.0038874485 0.0007432236 -0.0188030677 -0.0215006383 0.0223981001 0.0300107664 -0.0231713313 -0.0049937544 -0.0201601468 -0.0129956363 -0.0262764929 0.0795726867 0.0570534604 -0.0717749394 0.0131357156 0.0301637487 -0.0052202155 0.0179068758 0.0140150159 0.0130329410 -0.0043239445 0.0391376097 0.0662748372 -0.0292977333 -0.0456982850 0.0740912225 -0.0110210019 0.0062673076 0.0051850836 0.0041101595 0.0011790543 0.0122706059 0.0127430559 -0.0056735852 0.0057215623 0.0071626727 -0.0071053017 -0.0036891398 -0.0063306632 -0.0049905302 -0.0061621770 0.0005684169 -0.0037246174 -0.0071857210 0.0158249996 0.0031413596 -0.0014956142 0.0058418945 0.0070229786 -0.0093159152 -0.0121811782 0.0138840099 0.0020625267 -0.0106473518 0.0097925872 -0.0790789390 0.0322916255 -0.0312594241 -0.0284225175 0.0377516137 -0.0063513097 0.0133362726 -0.0218098001 0.0115689166 0.0167444192 -0.0279280877 0.0042507323 0.0203569305 0.0109808904 -0.0064600477 0.0015541855 0.0157137919 0.0059629643 -0.0577556879 -0.0557829944 -0.0147372488 -0.0180930824 0.0215253399 -0.0085610503 -0.0811264935 -0.0966509729 -0.0876699910 0.0054885682 -0.0085945206 0.0080100678 -0.0071891900 0.0051177472 0.0000394239 -0.0008434722 0.0033557950 -0.0023307513 -0.0027102138 -0.0050089186 0.0026152268 -0.0008128885 0.0006991948 0.0014211715 0.0295492097 -0.0688574965 -0.0314103905 0.0031932316 -0.0168276303 0.0078061668 0.0023106316 -0.0078531048 -0.0069442407 0.0007614200 -0.0082535386 -0.0124912928 -0.0219589384 -0.0003815290 0.0095081062 0.0086146231 0.0283000887 0.0032935024 0.0183004411 0.0145888926 0.0067874752 -0.0029489470 0.0003922932 0.0070585726 -0.0127454870 0.0125742887 0.0340878528 -0.0193710687 0.0415655248 0.0168054091 -0.0125623833 0.0544723804 -0.0341707839 -0.0037515742 -0.0446772603 -0.0093332890 0.0085680191 0.0520106450 0.0047207648 -0.0256336507 0.0767973754 0.0752881635 -0.0036533884 0.0142660060 0.0005611105 -0.0032079214 0.0125633632 0.0008322389 0.0064906959 -0.0044111993 0.0028202731 -0.0158894439 -0.0173411797 0.0039187166 -0.0141092734 -0.0281973510 -0.0024852731 0.0213043563 -0.0007237851 -0.0062788964 -0.0110997202 0.0036236672 -0.0310992150 -0.0123810902 -0.0424235944 0.0132926600 0.0227675663 -0.0490582427 0.0154476786 0.0128328970 -0.0143152476 -0.0287517690 0.0124063917 0.0157188687 0.0117586218 0.0018054241 -0.0007094285 -0.0009913832 -0.0018849752 0.0007103043 -0.0187833150 0.0506037932 -0.0347053498 0.0215477494 -0.0006760613 -0.0005145992 -0.0047647777 0.0018143296 -0.0012950805 -0.0002503596 -0.0043622713 0.0027200345 0.0058130170 0.0182404929 -0.0208436542 -0.0729587568 -0.0252335774 0.0347182211 0.0944160910 -0.0375930458 0.0308260363 0.0457015980 0.0084294139 -0.0073707251 0.0456956777 0.0003646833 -0.0018078752 -0.0008301261 -0.0009994577 0.0032718952 0.0021108826 -0.2519879644 0.3307311854 -0.1654773161 0.1158721129 -0.1149366072 -0.1573825835 0.1888361302 -0.3118938065 -0.0734257025 0.0462831555 0.0567150536 -0.1912355002 0.0185707835 -0.1420293575 0.0994862750 0.0390287440 -0.1542181740 0.1781741740 0.0166830198 -0.0248902429 -0.0802790286 -0.0215924833 0.0687333196 -0.0035073833 -0.0105576469 0.1649363688 0.1179574036 0.0017311971 0.0027292041 0.0025186670 -0.0027116383 0.0005422176 -0.0016020863 0.0012254707 0.0046400264 -0.0006945036 0.0235321820 0.0282598131 -0.0292299815 -0.0092128639 -0.0111775640 0.0181331068 -0.0079860525 -0.0096268678 0.0058946465 0.0101255671 0.0158276134 -0.0161900348 -0.0078190056 -0.0075336540 0.0116393829 -0.0117313818 -0.0143657941 0.0122721857 0.0303082719 0.0758652951 -0.0637097411 0.0188712248 0.0760463104 -0.0637646439 0.0065147314 -0.0222979046 0.0119979134 0.0246086393 0.0874262638 -0.0702716527 0.0264369850 0.0782143583 -0.0628763605 -0.0159785002 0.0068251394 -0.0873643902 0.0031466452 0.0142246546 -0.0511456448 0.0354247443 -0.0166128370 0.0129203501 -0.0296404851 0.0149323557 0.0383873183 -0.0711679100 0.0107708111 0.0620953521 0.0169546096 -0.2062488409 -0.0177985345 0.0877406353 -0.1522222296 -0.0024269750 0.0970701568 0.0773952912 0.0287293377 0.0375756593 -0.0826458954 0.0689719735 -0.0471946617 -0.1365553516 0.0514036503 -0.0054366266 0.0003643449 -0.0119318670 0.0016293111 0.0111861039 0.0075580991 -0.0821921872 0.0226002081 0.0992388887 0.0338172813 -0.0592367141 -0.1102442801 -0.0178834172 0.0048726635 -0.0056758696 0.0028162953 -0.0175709755 0.0103687997 0.0096335647 -0.0127632621 0.0082027388 0.0349084089 0.0127683456 -0.0081430257 -0.0061974472 -0.0176738013 -0.0078075804 0.0428787191 -0.0170218280 -0.0239611381 -0.0027669004 -0.0329115789 0.0086780672 -0.0252243352 0.0186425452 -0.0035033318 0.0468411906 -0.0300700106 0.0228593047 -0.0263214313 0.0175398510 0.0080410613 0.0010108413 0.0338076834 -0.0136417434 -0.0091417109 -0.0257171572 -0.0328025657 0.0224983399 0.0576268770 -0.0352764464 -0.0256452659 -0.0399706321 -0.0232832870 0.0158315290 0.1112318896 0.0667969672 -0.0674761664 -0.0136527072 -0.0037662100 0.0044979656 0.0335560229 0.0121007215 0.0294537191 -0.0089025530 0.0710731180 0.0570673085 -0.0132278719 -0.0523994163 0.1084860041 -0.0003022192 0.0323921768 -0.0012973760 -0.0017652433 -0.0026167178 -0.0138342865 -0.0141965822 0.0077206299 0.0021804219 0.0020493188 0.0090249455 0.0087566594 0.0132563089 0.0066433398 0.0021563971 0.0009593055 0.0039781221 0.0011520171 -0.0137849780 -0.0009974427 -0.0075664372 0.0066814826 0.0022590359 0.0120931524 0.0112896815 -0.0130811951 0.0195224213 0.0173141306 -0.0176116203 0.1875144852 -0.1085853000 -0.0879069518 0.0839209985 -0.0584978235 0.0208201278 -0.0009429590 0.0130613219 0.0294397391 -0.0037091355 0.0053030914 -0.0175701097 -0.0223118455 -0.0370125016 0.0086508153 -0.0107636458 -0.0383431786 0.0094029439 -0.0054864062 0.0133886131 -0.0242599969 -0.0207326620 -0.0151896746 -0.0129365048 -0.0034627602 0.0126806759 -0.0260125241 0.0163850459 0.0002078891 0.0138370081 -0.0143667302 -0.0074513370 0.0082501166 -0.0012112058 -0.0021987413 -0.0008424859 -0.0013673108 0.0050513895 0.0034904431 -0.0034999823 0.0060319267 -0.0062576650 -0.0224129964 0.0283793864 -0.0060150342 -0.0007348321 -0.0036121008 0.0030670078 0.0004322635 0.0005026893 -0.0009583215 -0.0036235627 0.0042669874 0.0007923740 0.0049185484 0.0002046455 -0.0046121910 -0.0035311453 -0.0051178945 -0.0030485206 -0.0023787512 -0.0077771478 0.0076921106 0.0005383250 0.0004442722 -0.0002475734 0.0101599133 -0.0030080922 0.0031989713 0.0064279447 -0.0098125250 -0.0041103460 -0.0281284946 -0.0065154069 -0.0355804310 0.0032188874 0.0123718690 0.0053219790 -0.0024612533 -0.0199536465 -0.0049362432 0.0199119285 -0.0382112305 -0.0137853781 0.0011284750 -0.0054589449 0.0015078278 0.0038421706 -0.0054360262 0.0032615073 -0.0086562796 0.0010225225 -0.0092786388 0.0109368665 0.0068740274 0.0052559271 0.0075979862 0.0109828601 0.0065288269 -0.0094460650 0.0016711950 -0.0033838567 0.0221856295 -0.0101374562 0.0651808724 -0.0183580091 0.0196583514 -0.0598974721 -0.0428181353 0.0330165288 -0.0487970754 0.0109420082 0.0065955690 0.0464282973 -0.0151350063 -0.0031583399 -0.0298596252 0.0017764369 0.0013499176 0.0001821931 0.0018831147 0.0016010694 0.0085700718 0.0097173950 0.0240415869 0.0023145695 -0.0001946198 0.0022111828 0.0015891504 0.0006407539 0.0002578223 0.0001587221 0.0024803944 -0.0004352704 -0.0040986258 -0.0078457380 0.0027218626 0.0425619670 0.0117884172 -0.0135301381 -0.0515943612 0.0163609745 -0.0090099097 -0.0239840177 -0.0050672687 0.0101460713 -0.0288528260 -0.0004628570 0.0012860117 0.0008301965 0.0004219789 -0.0021708517 -0.0014844192 0.1248019718 -0.1707480468 0.0854585270 -0.0610334103 0.0587601553 0.0828253809 -0.1122424864 0.1741536518 0.0350732252 -0.0075204510 -0.0145541425 0.0521175976 -0.0091557835 0.0676020895 -0.0570991618 -0.0107652038 0.0734587830 -0.0856402697 -0.0113052147 0.0246553261 0.0675027095 0.0137196849 -0.0387282256 0.0158412686 0.0083685507 -0.1122983655 -0.0793602909 -0.0004065234 -0.0012900667 -0.0008611895 0.0014826989 -0.0004303968 0.0011478408 -0.0011152861 -0.0009781987 0.0003658768 -0.0770751867 -0.0236157541 0.0441295774 0.0317733212 -0.0899568888 -0.1387664064 -0.0076448284 -0.0477139186 -0.0796562164 -0.0493581035 0.0086056456 0.0117696518 0.0401306531 0.0659651051 0.0552019785 0.1116743218 0.0818716685 0.0908668179 0.0846793222 -0.2216378769 0.0112924470 -0.0517976588 -0.1259490436 -0.0062412432 -0.2262799610 0.0846999546 0.0130696149 -0.0364246601 -0.0794287881 0.1815349898 0.1393063571 -0.1369219237 0.1629374009 0.0085615912 -0.0285249140 -0.0967310931 0.0298537853 -0.0087173430 -0.0589337233 0.0132999994 0.0208751803 0.0032388503 -0.0209672833 0.0004741992 0.0641398282 -0.0603955418 -0.0172275507 0.0783748486 -0.0714958134 -0.0286122783 -0.0963729591 0.0289491311 0.0471165086 -0.0525882607 0.1149865939 0.0505205849 0.0465352499 -0.0234886038 0.0707705104 0.0460314814 -0.1217876538 -0.0122857100 0.0197480752 0.1152988213 0.0984973647 0.2028368032 -0.0028047136 -0.1395348472 -0.2112702513 -0.0913275013 0.0302021460 0.0998391593 0.0377849373 -0.0544890938 -0.1222588381 0.0491407695 -0.0022649934 0.0241042104 -0.0059233181 0.0245372413 -0.0589344995 -0.0288307462 0.0220687922 -0.0373832824 -0.0911201603 -0.0384084472 0.0187601369 0.0325642610 0.0791622406 0.1165494931 -0.1023025121 0.0395046426 0.0907312678 0.0033157060 0.0983075277 -0.0036750491 0.0560261110 -0.0326959827 0.0244167722 -0.1404594971 0.0528726456 -0.1450992876 0.0296154383 -0.0858294588 -0.1413037158 0.0004658311 -0.0024780492 -0.0008222159 -0.0050906473 0.0045949652 -0.0059404656 0.0009886490 0.0125693858 -0.0020550441 -0.0022209929 -0.0003548090 -0.0011617174 0.0120257488 0.0084574460 -0.0074315367 0.0035566928 -0.0004585350 -0.0078052482 0.0053469204 0.0034106330 0.0001661360 0.0087683847 -0.0057458406 0.0142115794 -0.0125685795 0.0060684635 -0.0006019147 -0.0028998835 0.0006307400 0.0223926529 -0.0020980832 0.0003138042 0.0007847329 0.0053294190 0.0019105734 -0.0008795825 -0.0059901098 -0.0069010688 -0.0006885670 -0.0004231545 -0.0031309682 -0.0022009032 0.0011514935 0.0014986885 -0.0037321002 -0.0089290227 0.0049087748 0.0051408321 0.0128266155 -0.0032985746 0.0022240093 -0.0061998977 -0.0076939182 0.0093529087 0.0632354958 -0.0558997811 0.0129144585 -0.1277338709 0.1729014224 0.0105857075 -0.0230435643 0.1387139442 -0.0493817983 0.0425347026 -0.0909094006 -0.0197553919 0.0270678006 -0.1107558563 0.0725376809 0.0835706660 0.0833567126 -0.0704696635 -0.0173961488 0.0987799157 0.0441238565 -0.0631355161 -0.1251426033 0.0651447787 0.0395640996 0.0731689961 0.0260370845 -0.0193509729 -0.2318436721 -0.0842369760 -0.0888633892 0.0308238461 -0.0237560805 -0.0629096454 -0.0265862712 -0.0183991653 0.0222917303 -0.0055034742 0.0031234362 0.0265888414 0.0140576493 -0.0175383053 0.0098012430 -0.0083048299 0.0236276666 -0.0124283193 0.0288035103 0.0011675320 -0.0016079155 0.0174358286 -0.0047085236 -0.0038424581 0.0080681271 0.0067698919 0.0026961544 0.0050356146 0.0053412587 0.0108178647 0.0021290312 -0.0041884246 -0.0050972087 -0.0182562495 0.0006257038 -0.0024267566 -0.0029306497 -0.0090793431 0.0017548444 -0.0015343592 -0.0046391312 0.0041590267 0.0019894138 -0.0166720116 -0.0004857613 -0.0201390682 -0.0138868781 0.0212280656 -0.0166840919 0.0282686282 -0.0001525330 0.0202145592 0.0065576737 -0.0058456018 -0.0191679436 -0.0000977886 0.0065348061 -0.0281838968 -0.0286009900 0.0000215055 -0.0047167209 -0.0002556359 0.0019936188 -0.0045217961 0.0017883973 -0.0026168876 0.0016268436 -0.0035239579 0.0070618705 0.0058438535 0.0000404627 0.0045116274 0.0094869504 0.0017488218 -0.0051849834 0.0002900540 0.0002964373 0.0097468545 -0.0030813408 0.0246909925 -0.0003712661 0.0119874806 -0.0170093679 -0.0204626779 0.0224867041 -0.0119862376 -0.0003385422 0.0045633202 0.0124119858 -0.0110159006 -0.0047575411 -0.0155900168 -0.0064869549 -0.0054688929 -0.0052619200 0.0090910529 -0.0103747688 0.1481546486 0.0428579661 -0.0587999355 0.0197734547 0.0000121473 -0.0001111225 0.0026054852 -0.0005769343 -0.0005005019 -0.0004079985 -0.0014489665 -0.0018639974 -0.0017408650 -0.0050575832 0.0030958584 0.0187085826 0.0070837035 -0.0065988104 -0.0212818147 0.0084535050 -0.0054976018 -0.0111462986 0.0000912085 0.0028900487 -0.0119685887 0.0020286825 0.0020232679 0.0001096440 0.0007137021 -0.0020693961 -0.0014373696 0.0522327163 -0.0758821188 0.0366480931 -0.0236227781 0.0217343357 0.0385259851 -0.0501615406 0.0786885559 0.0179451957 -0.0029922347 -0.0072189068 0.0340650377 -0.0052732258 0.0344494655 -0.0291457995 -0.0067170617 0.0364681388 -0.0417723068 -0.0066863009 0.0028192655 0.0192848419 0.0042604510 -0.0109169772 0.0083962611 -0.0006375031 -0.0466688065 -0.0338743323 -0.0018420508 0.0001897394 0.0006202999 0.0001878540 -0.0050938858 -0.0022438602 -0.0018864887 -0.0000176673 0.0012329672 0.0407912690 0.0592224169 -0.0580333785 -0.0148727751 -0.0912043465 -0.0469664553 -0.0535980994 -0.0702564501 -0.0449050024 0.0028820972 0.0436166157 -0.0346936868 -0.0071079263 0.0445579486 0.0835023118 0.0379452727 0.0251338598 0.0989984066 0.1245607762 0.0735269619 -0.1910830372 -0.0037152958 0.1882884223 -0.2306110450 -0.1126510055 -0.0012237477 0.0329949651 -0.0078181277 0.1957072746 -0.0576278753 0.1441186485 0.1230362031 -0.0352851518 -0.0320940773 0.0428165254 0.0834691961 -0.0590963177 0.0135777822 0.0616319912 0.0114044638 -0.0323614727 0.0052745361 0.0047817869 0.0024242519 -0.0859142802 0.0323523585 0.0295739531 -0.0739369745 0.0845477277 -0.0879781155 0.1285643410 -0.0156885053 -0.1865445944 0.0665728981 -0.0859945627 -0.0171527603 -0.0409611618 0.0470885607 -0.1893899658 -0.0309107505 0.1295974465 -0.0765905241 -0.0065752947 0.0529083028 0.0569763254 0.0899676686 0.0009282508 -0.0551464974 -0.1039957745 0.0651739997 -0.0246819101 -0.0671300554 -0.0286476199 0.0332258162 0.0881028862 -0.0357322563 0.0093269248 -0.0252288678 0.0190538839 -0.0292889381 0.0503199065 0.0086611616 -0.0497980168 0.0376226966 0.0670561096 0.0265480739 -0.0179807693 -0.0463502223 -0.0760559728 -0.0340746987 0.0764186501 -0.0227533643 -0.0522996781 -0.0091742016 -0.0816658681 0.0115524950 -0.0680230636 0.0527124760 -0.0175659289 0.1219506293 -0.0641126382 0.0752701532 -0.0500588910 0.0882461498 0.0689922482 0.0422233258 0.0300674527 -0.0289747764 -0.0236542913 -0.0249539104 -0.0211916878 0.0081903493 0.0787918138 -0.0367668785 -0.0555555737 -0.0645458967 -0.0265868040 0.0892110537 0.1122458877 0.0557179541 -0.0049183082 -0.0911831684 -0.0547565008 0.0174629661 0.0568652004 -0.0219490270 0.0307097087 -0.0111244953 0.0734006635 -0.0155637729 0.0460577084 -0.0533634106 0.0887506043 0.0002885697 0.0449507339 0.0012915990 0.0010550342 0.0016231111 0.0072045614 0.0084068342 -0.0044529771 0.0001891998 0.0008803899 -0.0053664964 -0.0068017317 -0.0071378392 -0.0028456068 -0.0015975752 0.0017569106 -0.0012995426 -0.0042232783 0.0016588962 0.0002795830 0.0083260220 -0.0073088268 -0.0033582053 -0.0057698145 -0.0035238854 0.0072394825 0.0035007304 0.0310950557 0.0693105189 0.0817727469 0.3059242013 0.8088662488 -0.0208113384 -0.0654147713 -0.1606459291 -0.0022097995 0.0043371526 0.0217967729 -0.0011719895 -0.0020239236 -0.0055315568 -0.0004384496 0.0054413461 -0.0012952639 0.0078207129 -0.0054305907 0.0079597065 0.0073431437 -0.0137414416 -0.0050352834 -0.0026901092 0.0044948393 0.0041536984 -0.0590647493 0.0305977201 0.0418426904 -0.0068237861 0.0019028735 -0.0059470636 0.0041872918 0.0009601673 -0.0015548238 0.0008389205 -0.0013287831 -0.0002738061 0.0004671264 0.0000442714 -0.0009075414 0.0012191493 -0.0007738377 0.0019362817 0.0006965499 -0.0000794444 0.0006725072 0.0001714504 0.0002869045 0.0000167872 -0.0000559927 0.0001188122 0.0000662256 0.0000639684 0.0001095691 0.0001993211 0.0001521700 0.0000447251 -0.0000906884 -0.0000756573 -0.0003737103 0.0001058315 -0.0000395634 0.0000471630 -0.0002632277 0.0000076758 0.0000268229 -0.0001360789 0.0001825031 0.0003775822 0.0001095360 -0.0003905549 -0.0002098627 -0.0004086283 0.0007547462 -0.0003584401 0.0010019638 -0.0001950998 0.0003852937 0.0001213822 -0.0000398231 -0.0003422305 0.0001070468 0.0008267616 -0.0010941669 0.0004442240 -0.0001326366 -0.0000807928 -0.0002899090 -0.0001211728 -0.0000196279 -0.0002966908 0.0001829159 -0.0000119955 0.0003774601 0.0002527499 0.0000512417 0.0002300912 -0.0000111008 0.0001872522 -0.0001776978 -0.0000352642 0.0000143764 0.0000651209 -0.0008512582 0.0003609594 -0.0020039493 -0.0003104235 0.0002777969 -0.0010109427 0.0001458162 0.0002884931 0.0011957793 -0.0002134596 0.0000889506 -0.0003578206 0.0006302563 -0.0003764338 0.0018178370 -0.0002209973 -0.0002164965 -0.0002514382 0.0004195456 0.0002048731 0.0056438277 0.0022854358 -0.0035002899 0.0014855780 -0.0000379883 -0.0001660305 -0.0000815844 0.0000370705 -0.0002271164 -0.0000904273 0.0000134599 0.0000820325 0.0000158766 0.0001160518 0.0001483768 0.0001974658 -0.0000454374 -0.0001764115 -0.0002101025 -0.0000914110 -0.0000434072 -0.0001645124 -0.0001402485 -0.0000299450 -0.0000957207 -0.0000791198 0.0000116130 0.0000270872 -0.0000154497 0.0000887383 0.0000413688 0.0008674730 -0.0007652227 0.0003476574 -0.0006920514 0.0010014040 0.0003586139 -0.0002111613 0.0007661979 0.0004289219 -0.0008588306 -0.0004467554 0.0012126130 -0.0001537134 0.0002915336 -0.0000030487 0.0006720490 0.0006172617 -0.0008877088 0.0001590309 0.0002763856 0.0001537186 0.0001217628 -0.0005124990 -0.0005100889 0.0002056294 -0.0002370499 -0.0001201301 -0.0000333494 0.0001470063 0.0001026727 -0.0000008971 0.0000881898 0.0001016139 -0.0000406557 0.0000585978 0.0000792932 0.0052230190 0.0178345759 -0.0076701932 -0.0062748354 -0.0067549663 -0.0028198868 -0.0082427096 -0.0009103359 0.0038703285 0.0020408817 0.0080363551 -0.0015500731 0.0066676686 -0.0161526691 -0.0003095424 -0.0026426291 -0.0134308477 -0.0076900203 0.0008748965 0.0082865662 -0.0172576869 -0.0098851291 0.0456281806 -0.0168616929 0.0005561837 -0.0058451791 0.0027972397 0.0569869523 0.0360502746 -0.0343716291 0.0057086606 0.0020444098 -0.0230228062 -0.0003118982 0.0012675684 -0.0001344312 -0.0005732879 0.0016146468 0.0005376551 0.0008138778 -0.0012470259 0.0006872211 -0.0010077392 0.0005469626 -0.0018961171 -0.0000938249 0.0008701639 -0.0015169150 0.0017540537 -0.0046059028 0.0019020939 0.0053287428 -0.0096519625 0.0045093464 -0.0009056365 0.0008430779 -0.0007995694 0.0018028546 -0.0105813210 0.0014830440 0.0020643724 -0.0031342351 -0.0004726867 -0.0002296117 -0.0004495510 -0.0033718960 -0.0005701586 0.0019836291 0.0003805749 0.0004798391 -0.0003779622 -0.0003541613 -0.0001759730 -0.0000327868 0.0006433949 0.0165138338 0.0405233127 0.1004434472 -0.0123195559 -0.0221360270 -0.0487095862 -0.0071129157 -0.0107304430 -0.0410582512 -0.0066144528 -0.0134788541 -0.0388504378 0.0105623693 0.0403306677 0.0866543811 0.0488058338 0.1193315821 0.2969280270 0.0082974951 0.0160979091 0.0437482201 0.0083202837 0.0003552367 0.0100124274 -0.0564355073 -0.0698544749 -0.1884130633 -0.0088324866 -0.0366313527 -0.0954528221 0.0046281170 -0.0000578525 0.0062395809 -0.0060877396 0.0034116918 0.0012583652 -0.0020618709 0.0074108934 -0.0031076528 -0.0065034192 -0.0086219468 -0.0042517904 0.0093269348 0.0026811173 -0.0081714155 -0.0075442809 -0.0076600331 -0.0045688258 0.0027340152 0.0097560094 -0.0073542402 0.0063498185 -0.0035404725 0.0061267470 -0.0053514578 0.0076822694 -0.0148312153 -0.0165224107 0.0065277214 0.0203004028 0.0001507701 0.0001424700 -0.0000970441 -0.0000697016 -0.0001478340 0.0001417253 0.0002456799 0.0002484879 0.0001380139 0.0004630902 0.0003946933 0.0000289597 -0.0002441599 -0.0000613363 -0.0000699366 -0.0004249550 0.0005819298 0.0003075386 -0.0004509838 0.0005080123 0.0004224589 0.0008134293 -0.0003530434 0.0001082751 0.0022003595 0.0014113632 0.0070885917 0.0040893758 0.0304041562 0.0618987992 -0.0026162148 0.0004318257 -0.0156692216 0.0080031018 0.0083819625 0.0058116980 -0.0000482166 -0.0055004853 -0.0021344295 -0.0086126489 -0.0017802415 0.0043342119 0.0133349744 -0.0061546594 -0.0177401766 -0.1153690677 0.0866713153 0.0960819534 0.0521738008 -0.0434777249 -0.0435328212 0.6376756308 -0.4174337596 -0.4333098114 0.0005876772 0.0014836075 0.0019668383 -0.0058432079 -0.0020407687 0.0002046778 0.0003156398 0.0004736870 0.0001039870 0.0013529798 0.0008509682 -0.0005042157 -0.0001667540 -0.0000130339 0.0007643429 -0.0000210568 -0.0002914971 -0.0010002182 -0.0015234523 -0.0003516431 -0.0010965002 0.0002125178 -0.0001786025 0.0003110278 -0.0000688646 0.0000443090 -0.0001182591 -0.0003283094 0.0002477610 -0.0004594449 -0.0003091387 0.0003119342 -0.0004821860 0.0005013264 -0.0000522758 0.0004889335 -0.0000320954 -0.0000832959 0.0001784328 0.0017995292 0.0001223074 0.0035202668 0.0010405350 -0.0004279042 0.0019197337 -0.0017728194 0.0013904094 -0.0028968542 0.0000837862 -0.0002645338 0.0000016796 -0.0000438043 0.0002488863 0.0000148952 -0.0009012982 0.0010042831 -0.0006884237 -0.0000197214 0.0001204895 0.0000760741 0.0000193412 0.0000623381 0.0000580763 -0.0000377156 -0.0000368446 -0.0000621594 -0.0000874939 -0.0000768916 -0.0000420692 -0.0000774150 -0.0001581352 0.0000203091 0.0001473070 -0.0000149250 -0.0000382931 0.0001391704 -0.0000988654 0.0003192081 0.0000330589 -0.0003051594 0.0002169841 -0.0000312906 -0.0002067578 -0.0000562079 0.0000799461 -0.0000279010 -0.0002112415 -0.0000949571 0.0001298211 -0.0003146911 0.0000187031 -0.0000105902 -0.0002367108 0.0002386134 -0.0005455646 0.0050723161 -0.0143788021 0.0353039389 -0.0129031540 0.0001355181 0.0002284537 0.0000303468 -0.0001060641 0.0001903538 0.0000919992 -0.0000923591 -0.0002396226 0.0000160814 -0.0003910689 0.0004637325 -0.0003619010 0.0000509542 0.0002145643 0.0002586485 0.0003943893 -0.0005066019 0.0001097313 0.0003819129 -0.0004579775 0.0003637280 0.0001626887 0.0001001638 0.0000031381 0.0000441539 -0.0001608275 -0.0001096026 0.0000550965 -0.0001557299 0.0005218940 0.0015375114 -0.0030288291 -0.0001304056 0.0017142588 -0.0014498072 -0.0002044145 -0.0006843228 -0.0009543868 0.0026684019 -0.0001417569 0.0009454419 -0.0002692434 -0.0007650349 0.0006979927 -0.0005317668 -0.0001508811 -0.0016079709 -0.0024915550 -0.0003843014 0.0011107625 -0.0001132457 -0.0006296265 0.0016516830 0.0010209796 -0.0000627178 -0.0001398637 -0.0001128531 -0.0000126494 -0.0003335585 -0.0002423530 -0.0000433434 -0.0000811716 -0.0000386951 0.0018733681 0.0019913697 -0.0015148279 -0.0008786091 -0.0012606339 -0.0006359314 -0.0018127180 -0.0008039122 -0.0005187443 0.0004876868 0.0008481600 -0.0003813939 0.0001505216 -0.0004582508 0.0012139223 -0.0000799721 -0.0007928590 0.0002930864 0.0002048910 0.0010890998 -0.0030063101 -0.0018774834 0.0059204189 -0.0038116541 -0.0004513380 -0.0005451352 0.0004135611 0.0037649445 0.0058448727 -0.0036493555 0.0010461092 0.0015637850 -0.0016725502 -0.0012042722 -0.0109913877 0.0100923650 -0.0049509009 -0.0187216711 0.0040064981 -0.0057783271 0.0129134773 -0.0067133364 0.0113572723 -0.0086754665 0.0076981629 0.0018771794 -0.0066580042 0.0104256594 -0.0151085558 0.0400826502 -0.0070584619 -0.0715942016 0.0856514729 -0.0458509866 0.0047268517 -0.0104196810 0.0063155293 -0.0179111925 0.1005881459 -0.0258891366 -0.0130378766 0.0225279486 0.0028618814 0.0001921786 0.0002276045 0.0001199159 -0.0000579282 -0.0000655222 -0.0004311170 -0.0014466533 0.0026768689 -0.0003340518 -0.0003128865 0.0023420420 -0.0015756449 -0.0003342738 0.0032404423 0.0101717656 0.0040154162 -0.0023634016 -0.0085975663 -0.0018342723 -0.0101556588 -0.0003095909 0.0052314369 0.0018812515 -0.0052758895 -0.0083524586 -0.0043178822 0.0140307480 0.0091586266 0.0139035089 0.0223658209 -0.0004090254 -0.0037231487 0.0065822867 -0.0065669516 0.0055902836 0.0003095251 -0.0045986648 -0.0125865220 -0.0177414000 -0.0092022797 0.0006112805 -0.0109855709 -0.0445225687 0.0198850603 0.0152798840 0.0755576009 -0.0435127110 -0.0513113266 0.0365434936 -0.0228861311 -0.0184027234 0.0068212037 0.0115098247 0.0061519016 -0.1606383400 0.0632634416 0.0858918541 -0.0114633765 0.0211920571 0.0173720026 -0.0249689184 0.0045417182 0.0197606862 -0.0340523104 0.0142043498 0.0150649427 0.0261654131 -0.0203940093 -0.0077486550 0.2335524449 -0.1335445487 -0.1595706681 -0.0002157811 -0.0002995271 0.0000959418 -0.0004773973 -0.0000318579 -0.0001060292 -0.0001080849 0.0000089660 -0.0000989250 -0.0007686205 -0.0004507067 0.0000977388 0.0003493291 -0.0000438458 0.0002495512 0.0010984479 0.0004078536 -0.0001069706 0.0013937988 -0.0018228313 -0.0009994725 -0.0027767376 0.0008060485 -0.0001445105 0.0002507283 -0.0000991234 -0.0003000533 0.0011526039 -0.0007434367 -0.0024590815 0.0006240272 0.0003531323 0.0003335619 -0.0000662820 -0.0003170221 0.0000255123 -0.0001714026 -0.0003175085 0.0001460030 0.0001153154 0.0001862132 -0.0002120881 0.0000104818 0.0000215630 0.0001706617 -0.0002496043 -0.0001397218 0.0002882763 0.0002116103 0.0001705288 0.0000060448 0.0007805124 -0.0010210489 -0.0007385952 -0.0003461940 0.0001833683 -0.0000492531 -0.0001360809 0.0001245839 0.0001571835 0.0000610239 -0.0002874073 0.0000381250 0.0001876346 0.0004587530 -0.0001851632 -0.0000111860 -0.0000439913 0.0000576087 0.0040612759 0.0016568809 0.0298247663 0.0039483660 -0.0016899082 0.0106185170 -0.0020651160 0.0024584707 0.0001484989 -0.0050495224 0.0055645914 -0.0007458180 0.0086601825 -0.0009517040 0.0002176801 -0.0051170052 -0.0048109901 -0.0050097515 0.0026619775 -0.0033001028 0.0034045812 0.0006318808 -0.0002483423 -0.0013177687 -0.0073169640 0.0023571223 -0.0292785119 0.0156088901 -0.0159290088 0.0212139699 -0.0104878566 0.0005003809 -0.0170333410 -0.0039904594 0.0051391103 0.0061281923 0.0016534579 0.0028746205 0.0064185393 0.0934607256 -0.0813282005 0.1343013998 -0.0280080096 0.0058149512 -0.0597586335 -0.0376014189 0.0140550494 -0.0842361255 0.0386190245 -0.0184493683 0.0972258598 0.0472762798 -0.0092810541 0.0863206274 -0.0099608991 -0.0025150237 -0.0185380042 -0.0002566428 0.0040905612 -0.0136964842 -0.2321948889 0.0795566935 -0.5239253716 -0.2012801043 0.1123384827 -0.4517300065 0.0424773177 -0.0165229838 0.1053809770 0.0290672379 -0.0042081542 0.0567905720 0.2140162515 -0.0680545273 0.5118029574 -0.0001641796 -0.0003890010 0.0001038210 -0.0001929155 -0.0003037239 0.0001249006 0.0001173882 -0.0000659112 0.0000623673 0.0008465079 0.0002457624 -0.0028738734 0.0018211875 -0.0044298190 -0.0001854427 -0.0006440786 0.0011632043 -0.0002160161 0.0019435709 -0.0005051324 0.0031167804 -0.0010434083 0.0000489736 -0.0025441083 0.0000737578 0.0004230526 -0.0018162594 -0.0015752304 0.0006968511 -0.0017619969 -0.0003421592 0.0007364803 0.0002223446 -0.0001133466 0.0010513870 0.0001668714 0.0051249757 -0.0048630207 0.0024378701 -0.0053359326 0.0067319807 0.0022897680 -0.0032779344 0.0066023280 0.0013212206 0.0024454899 0.0018143492 -0.0015141101 0.0035533971 -0.0076656118 0.0068006556 -0.0012136914 0.0093406132 -0.0086793050 0.0006316684 0.0042617277 0.0058919651 0.0019144537 -0.0062610621 -0.0022713035 0.0028107396 -0.0067245029 -0.0040227118 0.0003307605 0.0037691918 0.0033466087 -0.0002194829 -0.0014327478 0.0006417539 -0.0012526994 0.0019901365 0.0013830459 -0.0008386251 -0.0002998412 0.0003832389 0.0005931100 0.0007211742 -0.0020533645 -0.0003981497 -0.0011695091 0.0000091595 -0.0009527312 0.0001657144 0.0002683237 0.0002021569 0.0001563337 0.0006544131 0.0006557331 0.0006044545 0.0006783544 -0.0030005333 -0.0080632253 0.0062737547 0.0030761171 -0.0003515404 -0.0041324764 -0.0005868255 0.0015685058 0.0001347257 0.0017858023 0.0015594630 -0.0000772770 0.0008169424 -0.0006571967 0.0010847606 -0.0000682317 0.0000490255 0.0002660018 -0.0002167063 0.0000347117 0.0003314637 -0.0001977517 -0.0002328418 -0.0001088304 0.0001082697 -0.0000276467 -0.0004486149 0.0001717749 0.0000915337 -0.0002131294 -0.0001376705 -0.0002123817 0.0003650210 0.0009902793 -0.0005760587 0.0016325281 -0.0003990743 0.0000177044 -0.0002183621 0.0008553367 -0.0002229962 -0.0004863794 0.0004894619 -0.0000251732 0.0000699339 0.0006704854 0.0003838975 0.0014742225 -0.0003639886 -0.0010586832 -0.0016892352 0.0003896893 -0.0001874194 -0.0004715208 -0.0001844343 0.0002024715 0.0005705309 0.0002274571 -0.0001705200 -0.0002757300 -0.0000726849 0.0000608725 0.0001408343 -0.0000457404 0.0002094182 0.0000421969 -0.0004001690 -0.0001285641 0.0002305678 0.0000946727 0.0000573483 -0.0003039919 -0.0006030224 -0.0003375031 -0.0006185532 -0.0000045048 0.0002753626 -0.0002064250 0.0001822345 -0.0001333746 -0.0000402194 -0.0000444672 0.0004729759 0.0002880915 0.0003504942 0.0001677691 0.0003092351 0.0000368089 0.0000470681 0.0000779664 0.0000532071 -0.0001049731 -0.0001094819 0.0000930355 0.0001691316 -0.0001285638 -0.0001467575 -0.0001621398 -0.0000582850 -0.0001257353 0.0003583671 0.0001689455 -0.0000280402 -0.0002421615 -0.0000930001 0.0000082808 0.0002221271 -0.0001150350 0.0000086653 -0.0000236230 0.0001999005 -0.0001103735 0.0001747024 -0.0002591903 0.0005161449 -0.0003266401 -0.0001394292 -0.0017008964 -0.0066512323 -0.0037929806 -0.0238625420 -0.0222168451 0.0086040814 0.0103648064 0.0150191991 0.0096424949 0.0045723755 0.0082344433 0.0056930515 -0.0027385734 0.0060811524 -0.0055238381 -0.0394533677 0.0094735503 0.0218046175 0.0309363997 -0.0166465168 0.0030256071 0.0005864827 -0.0110015835 0.0168651975 0.0005547816 -0.0005681021 0.0001407660 -0.0006145870 0.0004826145 -0.0004113647 0.0001066047 0.0005234760 -0.0001932482 0.0001425460 0.0004458888 0.0002088273 0.0000468265 -0.0004903259 -0.0000422380 0.0000508354 -0.0004528474 -0.0000246084 -0.0007010381 0.0003524523 -0.0008591641 -0.0000435325 0.0000042520 -0.0004341330 -0.0002098444 0.0002571654 0.0001238279 -0.0019824588 0.0001615280 -0.0009890946 -0.0008561015 0.0007385611 0.0004615550 -0.0003347623 -0.0001089773 0.0001519556 0.0017597432 -0.0010944932 0.0010045656 -0.0001332487 0.0003960768 -0.0001636725 -0.0023617730 0.0008483032 0.0000679987 0.0014362097 -0.0035686930 -0.0066178211 -0.1661968442 0.1046683873 -0.2890420485 0.0300315736 -0.0194192572 0.0505979109 0.0113342908 -0.0076599616 0.0150474108 -0.0540829355 0.0294930404 -0.0816931757 0.0400851587 -0.0232254056 0.0640229778 -0.0508409941 0.0311575823 -0.0759747758 0.0194592069 -0.0091602761 0.0273855372 0.2685067113 -0.1346012740 0.4609267770 -0.2448842595 0.1326466940 -0.4079418394 0.2820250822 -0.1494488421 0.4283467149 -0.0048143467 0.0006657601 -0.0082833385 0.0032080858 0.0020377847 0.0066321343 -0.0285388244 0.0309055899 -0.0417778579 -0.0028791027 0.0031373692 -0.0047942439 -0.0018504672 0.0013629428 -0.0049270176 0.0025788944 -0.0013925054 0.0058148390 0.0006072745 -0.0021763054 0.0055608490 -0.0017202862 -0.0028174000 -0.0009475153 0.0019497548 -0.0001303134 -0.0012341431 -0.0119334179 0.0037376341 -0.0292463143 -0.0140874939 0.0015357704 -0.0260303181 0.0039120089 -0.0054687592 0.0052370365 0.0022088833 -0.0004477361 -0.0007868084 0.0137934042 -0.0028247837 0.0291920542 -0.0022292361 -0.0009659238 -0.0056929006 -0.0092116927 0.0346121825 -0.0637967321 0.0008734899 -0.0002250132 0.0007255520 0.0003242945 0.0007930326 0.0031588869 -0.0015386148 0.0043333206 0.0025206182 0.0001068234 -0.0010578107 -0.0005545614 -0.0020439963 -0.0009277722 0.0007212481 0.0015649063 0.0007650241 -0.0006514300 0.0021120572 0.0007423283 -0.0002186035 0.0014116214 0.0006813716 -0.0006645460 0.0011745720 0.0004899096 -0.0001342373 0.0003343883 -0.0020208619 -0.0012592422 -0.0015273965 -0.0028327937 0.0011636045 0.0031054964 -0.0057621909 0.0025362170 -0.0058580544 0.0048824324 -0.0008006887 -0.0034209643 -0.0027349693 0.0016358988 0.0002417437 0.0030755930 -0.0091034151 -0.0036679875 -0.0006003392 0.0022568272 -0.0019689815 -0.0022262389 0.0002006741 -0.0007735644 0.0038812453 0.0053401026 -0.0019039504 -0.0035810319 -0.0031484760 0.0009245860 -0.0031948407 -0.0024981977 0.0005015564 -0.0018828400 -0.0013632323 0.0010891921 -0.0031719543 -0.0020374078 0.0001695134 -0.0003276258 0.0001457563 0.0001758266 0.0001887606 -0.0004404693 -0.0003330184 0.0002870015 -0.0006833645 0.0000234582 -0.0002755003 0.0001794979 -0.0001580599 0.0001345970 0.0003615565 -0.0000484671 0.0001427917 -0.0000318217 0.0005612880 -0.0032992451 0.0035192537 -0.0033276752 -0.0017125306 0.0033997955 -0.0000528792 0.0002629441 -0.0001112683 0.0000423462 0.0008406260 -0.0002462827 -0.0003018388 -0.0001095673 0.0003519238 -0.0000376807 -0.0007971067 -0.0017094381 0.0004123403 -0.0005945679 -0.0015386345 0.0012770629 0.0021366177 0.0004619285 0.0007320856 -0.0028372766 0.0022272254 -0.0022925770 0.0031215188 0.0003123767 -0.0027286468 0.0006011241 -0.0020564088 -0.0029150257 0.0005267832 -0.0053882928 0.0030957321 -0.0012312019 0.0010098921 -0.0154199388 0.0094298674 -0.0003547783 0.0068459270 -0.0155970768 0.0048507409 0.0000306289 0.0000048171 0.0001086299 -0.0000121996 -0.0001002452 -0.0000821896 -0.0024379547 0.0019144704 0.0032411021 0.0010147417 -0.0010001285 -0.0035057771 -0.0000559421 0.0000944624 0.0000292713 0.0001642323 -0.0000393283 -0.0001541798 -0.0001079072 -0.0004812939 0.0001229388 0.0001558739 0.0001008981 -0.0000363637 -0.0002835734 -0.0003296119 0.0005448582 0.0000402235 0.0001566956 -0.0002535833 -0.0000020765 -0.0002604554 0.0000979436 -0.0002564111 0.0003106957 0.0000013247 0.0004408706 -0.0002411609 0.0001874702 -0.0003032837 0.0002006339 -0.0005190751 -0.0003110574 0.0000963954 -0.0007419053 -0.0002084406 -0.0001823470 0.0000345077 0.0000926937 0.0001518057 0.0001138863 0.0004662690 0.0005252551 0.0003285668 0.0003997963 0.0002083603 0.0002342877 0.0005408414 0.0003468551 0.0005856418 0.0000100737 -0.0006482020 0.0004512625 0.0000129731 0.0000047152 -0.0000714439 0.0001017412 -0.0004739796 0.0008922880 -0.0002571866 0.0001549016 0.0001486145 0.0006954017 0.0001664635 -0.0002783978 0.0003673138 0.0007585424 -0.0005083718 -0.0009492483 -0.0023362005 -0.0049236560 -0.0024359971 -0.0077812569 -0.0056063803 0.0012774997 -0.0019564047 0.0027057880 0.0188417803 -0.0032859676 -0.0103237043 -0.0109553592 0.0034725855 -0.0039229498 -0.0030888787 0.0010074521 -0.0012954476 -0.0824399531 0.0880425704 -0.0386358585 0.1427877638 -0.1482107884 -0.0787304718 0.0183760777 -0.0872738047 0.0572265309 -0.1522154686 -0.1542707651 0.0268342339 -0.0269251699 0.0908948862 -0.0285864040 0.0215206757 0.0981755959 -0.0135032696 0.1073322903 -0.1175539077 0.1422154071 -0.0605319940 -0.0730342126 0.0567257804 0.0907882190 0.0864111654 -0.0005893653 -0.0262329605 -0.1891909650 -0.1186269253 -0.0877458534 0.0163403601 -0.0711590785 0.1039224320 0.0347472589 0.0052319178 0.0055345186 -0.0254356965 -0.0052435866 0.0000211732 -0.0046569665 -0.0051268560 0.0086431558 -0.0057430259 0.0031318341 0.0051568681 -0.0018488218 0.0031394368 -0.0009779788 0.0019802506 -0.0005158555 -0.0005341862 0.0009135787 0.0013210322 0.0004911788 0.0006628778 0.0006622184 -0.0001244126 0.0010598299 -0.0023718009 -0.0000680483 -0.0022997266 0.0013053294 0.0009409036 0.0009131377 -0.0021092207 0.0004348968 -0.0013977244 0.0007339168 0.0071730242 0.0002183070 0.0112528623 -0.0059892095 0.0008540811 -0.0072067503 0.0063617667 -0.0007310685 0.0067663436 -0.0009520263 0.0015665307 0.0002354770 -0.0003209147 -0.0014657618 0.0007980641 -0.0006962387 -0.0009785016 -0.0032069079 -0.0002223684 -0.0002668898 -0.0003745462 -0.0001681436 -0.0002108512 -0.0001206160 0.0003592760 0.0003170556 -0.0001439161 0.0001080228 0.0001535004 -0.0000990658 0.0000967267 0.0006403790 -0.0005052559 -0.0000568853 -0.0001132891 0.0007868489 0.0009840695 -0.0000130541 -0.0002552659 0.0011146345 -0.0006085453 0.0020582173 0.0013520789 0.0004422446 0.0029823979 -0.0019300114 0.0001910085 -0.0037128847 0.0000248256 -0.0005570438 0.0012176558 -0.0020397885 -0.0010532976 -0.0026849431 0.0039668062 -0.0028549703 0.0575294667 0.0647248482 0.0162556660 0.0213788092 -0.0028239085 -0.0015060508 -0.0015792383 0.0032748066 0.0009591277 -0.0003195468 0.0054469010 0.0031139066 0.0000506166 -0.0014524038 -0.0005080732 -0.0005459007 0.0002223908 0.0003321668 0.0005632554 0.0002248769 0.0008240451 0.0000937205 -0.0001629202 -0.0002789581 0.0003033814 -0.0044122250 -0.0033620353 0.0001000111 -0.0015237944 0.0030506056 0.0024515939 -0.0024784457 0.0007985222 -0.0003715680 0.0013682666 -0.0020472655 -0.0001890078 -0.0002424631 -0.0020354705 -0.0013586670 -0.0087337265 -0.0047518739 0.0055424119 0.0005610443 -0.0002936774 -0.0026949680 -0.0002897187 -0.0013153252 0.0018648286 0.0002819426 0.0001627596 -0.0000853478 -0.0003677347 0.0002991072 -0.0005444525 -0.0000864904 0.0021175909 0.0014216013 0.0032740238 -0.0008871850 -0.0013181773 0.0005320204 0.0120164465 0.0066359387 0.0030931478 -0.0003338537 -0.0018244440 -0.0731092164 0.0049676976 0.0222342169 0.0127381056 0.0168391626 0.0162575340 0.0571474478 0.0280223937 0.0479857216 -0.0130679896 -0.0013604101 0.0056591564 0.0241929044 -0.0505029708 -0.0592815841 -0.0024303555 -0.0150638413 -0.0239360956 0.0108600120 0.0016341796 0.0381472958 0.0728483021 -0.0440857491 0.0720155019 0.0112872271 0.0013178266 -0.0041125698 0.0545052045 -0.1049762768 -0.0002153526 -0.0037324201 -0.0392227810 -0.0206523237 -0.0170950731 0.0013085331 0.0282109931 -0.0676407421 -0.0127458246 0.0497552187 0.0139798540 0.0014258665 0.0036021410 -0.0080957629 -0.0156811823 -0.0754147152 0.0039473347 -0.0024911613 -0.0196089200 -0.0200079321 -0.0151886225 0.0401150065 -0.0878376308 -0.0759294038 0.0150414612 -0.0104434566 -0.0023763820 -0.0048146450 -0.0101946694 -0.0878637637 -0.0549742572 0.0021945868 -0.0021287248 -0.0283144850 -0.0058283026 -0.0070404577 -0.0109306064 0.0003076884 0.0064710353 0.0123866117 0.0089145738 -0.0033119355 -0.0096428230 -0.0053305499 0.0046719126 0.0128842367 0.0214722793 -0.0165226469 -0.0194883006 -0.1417486690 -0.0372414459 0.0629916180 0.0380872743 0.2096188706 -0.0684006515 -0.0900098764 -0.0411832350 0.0286906162 0.1672157392 0.1667071685 -0.1808799123 -0.0668515244 -0.0664431204 0.0461610147 0.0227342842 0.0954501476 -0.0405352301 0.1552687225 -0.1260820533 0.0061526528 -0.0379786343 0.0886491784 -0.0508370208 0.1777280237 -0.0912221833 0.0950064737 0.0539363329 -0.0029669930 0.1471558296 0.0100861814 -0.0301280339 -0.0334164408 0.0083785577 0.0846311988 -0.0620473076 -0.1022711225 -0.1478021514 -0.0774262640 0.0429101050 0.0950243726 -0.0188874530 -0.1986560012 -0.1022325351 -0.0241327292 0.0024514325 0.1901011847 -0.1070912832 0.0428931221 -0.0202922024 0.0901309991 0.0060475298 0.1105424611 -0.2704721802 0.0508145508 -0.0643404229 0.0696761165 -0.0026919211 0.0080652272 -0.0034517206 0.0184312164 -0.0055915052 0.0059691008 -0.0190904684 -0.0291041279 0.0104430718 0.0404289506 0.0181605556 -0.0040000559 0.0001911873 -0.0126027814 0.0036343497 0.0347160679 0.0102110001 -0.0124051481 -0.0474659534 0.0353566690 0.0125103431 0.0393134873 0.0037602601 -0.0265817557 -0.0035611595 0.0038787593 -0.0015048169 0.0072361451 -0.0042053094 -0.0012518443 0.0002804385 -0.0026895430 0.0015295874 -0.0004919878 -0.0031272547 -0.0005504167 0.0010973191 0.0030265708 -0.0008073451 0.0010424267 0.0017364679 0.0006439690 0.0032073915 -0.0024885850 0.0055024354 -0.0011426399 -0.0012708416 0.0008544453 0.0006135284 0.0004751361 0.0001150006 0.0006707691 -0.0028180625 -0.0009938844 -0.0024585225 0.0005558090 -0.0038469808 0.0004953460 0.0003209196 -0.0000067722 0.0011850815 -0.0002137442 -0.0006462002 -0.0022039505 -0.0012821918 0.0012692902 -0.0002974076 -0.0005169691 0.0025007846 -0.0089554045 0.0043125549 -0.0103108566 -0.0043213213 0.0017878329 -0.0055767736 0.0004376473 -0.0003353753 0.0012571533 -0.0016496418 -0.0003078908 -0.0017630518 -0.0016317571 -0.0000167524 -0.0009128147 0.0011733641 0.0014478118 0.0006963565 -0.0006650971 -0.0003805926 -0.0004835500 0.0003125989 -0.0008409313 0.0013403610 0.0030802083 -0.0059050449 0.0054856021 -0.0008479315 0.0028026914 -0.0049058629 0.0010742570 -0.0031828635 0.0009309550 0.0021797118 -0.0014537411 0.0006330151 0.0011316915 0.0031134381 -0.0022840074 0.0089451143 -0.0039828415 0.0117176856 0.0019807030 -0.0005542424 0.0028047555 0.0026201957 -0.0017956525 0.0042679812 -0.0009571070 0.0015008744 -0.0028443701 -0.0031570505 0.0005346192 -0.0038947001 0.0010364179 -0.0001858096 0.0023471738 -0.0013420533 0.0000925112 -0.0030360437 0.0056188747 -0.0001756721 0.0222827937 0.0082883865 -0.0059474985 0.0210343940 -0.0065526857 0.0020189338 -0.0136445032 0.0068464925 -0.0032058871 0.0164012301 -0.0110032803 0.0023762253 -0.0274697038 0.0009978517 0.0009887703 0.0019003781 -0.0042916398 0.0060693120 -0.0524297225 0.0007096921 -0.0005418118 0.0003499962 0.0292397958 0.0113052724 0.0080998676 -0.0255200362 -0.0095961336 0.0019651913 -0.0371236479 -0.0206112852 0.0011605912 0.0117367789 0.0056416609 0.0004735527 -0.0026745180 0.0005114932 0.0010381963 -0.0018205822 -0.0015397155 -0.0017484632 0.0002487984 -0.0010932358 0.0008355662 0.0308608756 0.0246089323 -0.0008113664 0.0110884149 -0.0219250972 -0.0176722557 0.0006261206 0.0066231252 -0.0017488637 -0.0054679975 0.0127287189 -0.0044946893 0.0139498065 -0.0180552694 -0.0061112945 0.0053541539 0.0039478142 0.0069019652 0.0008590386 -0.0003408245 0.0193690941 0.0055167119 0.0050121996 -0.0084801462 0.0014548180 -0.0023120781 -0.0065105295 0.0013701547 -0.0019953591 -0.0050300786 0.0009888993 0.0017498556 0.0016352001 -0.0243963963 0.0069350425 0.0099018091 -0.0037177296 -0.0864617315 -0.0478792401 -0.0223847483 0.0013002775 0.0133539770 -0.0031926156 0.0004869485 0.0007207692 0.0004454551 0.0005857562 0.0009568866 0.0026030481 0.0015745132 0.0019394498 -0.0003095661 -0.0002350447 0.0002723159 0.0010390358 -0.0022603494 -0.0027272715 -0.0001859582 -0.0006520409 -0.0012123252 0.0018906534 0.0008826746 0.0014788127 0.0016226853 -0.0022209312 0.0051116982 0.0005296875 0.0000390814 -0.0002007636 0.0018060722 -0.0049724300 -0.0000305460 -0.0005801398 -0.0023509201 -0.0004760096 -0.0007746955 0.0012214147 -0.0000741677 0.0004483939 -0.0010686706 0.0001866492 -0.0002843039 0.0003492222 -0.0001745611 0.0002961393 -0.0008420124 -0.0002714798 0.0001377712 0.0005660390 -0.0003716769 0.0003402284 -0.0080231214 0.0030192269 0.0038301474 -0.0050884684 0.0029511749 -0.0001086462 -0.0009683207 0.0005527796 -0.0015478799 0.0022717853 -0.0011809008 0.0009355602 -0.0009707311 -0.0000613663 -0.0003646147 -0.0004115756 -0.0006828803 0.0000455245 0.0004017536 0.0008006318 0.0002078564 -0.0000726180 -0.0006778075 0.0001653768 0.0006781874 0.0000895822 0.0006587361 -0.0010326101 -0.0001740781 -0.0008931135 0.0000385089 0.0007763945 0.0006742827 0.0032491990 -0.0007775546 -0.0015228241 -0.0009633740 0.0004072749 0.0021800989 0.0020078167 -0.0039307602 -0.0005363799 -0.0018217821 0.0020832762 -0.0000988950 0.0027407805 -0.0008700610 0.0015562814 -0.0018699132 -0.0000719068 -0.0027816524 0.0024478166 -0.0020339480 0.0012893408 -0.0018560893 0.0038434654 0.0024427983 -0.0005676760 0.0051192548 0.0003062246 -0.0002237324 -0.0006582463 -0.0001192893 0.0014850652 -0.0016162751 -0.0035207965 -0.0044245135 -0.0024686695 -0.0002599201 0.0016947892 -0.0008023423 -0.0048214961 -0.0033784744 -0.0027418970 0.0003252384 0.0053676712 -0.0032809048 0.0010877759 -0.0003252912 0.0022886929 -0.0008916988 0.0037700806 -0.0072530192 0.0017979664 -0.0008229226 0.0015751913 0.0293493539 -0.0802421392 0.0286031499 -0.1997728444 0.0408858405 -0.0524843026 0.1982444312 0.2955134462 -0.0934260546 -0.3852726267 -0.1612552588 0.0457187328 -0.0079501802 0.1122517326 -0.0329925342 -0.3285308903 -0.0779633395 0.1225547906 0.4212771076 -0.3185049860 -0.1085433922 -0.3412936936 -0.0386040524 0.2415053341 0.0006740133 -0.0010780842 0.0004683809 -0.0031842820 0.0005679302 0.0014681564 -0.0003422946 -0.0001965164 -0.0001209011 -0.0025527261 -0.0005674776 0.0008118499 -0.0006629460 0.0003322382 0.0001094527 -0.0005691157 0.0007751779 -0.0007715106 -0.0004016814 -0.0001874140 -0.0016336275 -0.0000371966 -0.0004316169 0.0001432679 0.0010996882 0.0015259813 0.0002133943 -0.0034955709 -0.0001244127 -0.0006458455 0.0021211979 -0.0013294302 0.0012697914 0.0021563355 0.0005805172 -0.0004993260 -0.0025045047 0.0011295789 -0.0018239000 0.0010296973 0.0006266588 -0.0020812918 0.0002878082 -0.0017124539 0.0033414158 -0.0786787642 0.0220267425 -0.2102374326 0.0315944905 -0.0174445994 0.0516671087 -0.0069427726 0.0018883184 -0.0092509370 0.0062440809 -0.0121735570 -0.0048653226 -0.0089088736 0.0012679231 0.0159437569 0.0076288399 0.0104130792 0.0025813296 0.0068827915 0.0054131897 0.0042401299 -0.0017094808 -0.0034432554 -0.0031854854 -0.0340559457 0.0252206105 -0.0199664160 -0.0056184652 0.0175833282 -0.0085532314 -0.0188411181 0.0501072057 -0.0237179541 0.0169889538 -0.0192872132 -0.0150252493 0.0085305157 0.0151217459 0.0389698368 -0.3424667914 0.3342179567 -0.4334780001 -0.0119143064 0.0293447825 -0.0126677543 0.0015128704 -0.0002546018 -0.0180726844 0.0085462834 0.0025907264 0.0101285508 -0.0201207505 -0.0155847606 0.0196837183 -0.0111511494 -0.0221202297 -0.0002507949 0.0182330762 -0.0053988890 -0.0014135324 -0.0062312343 0.0056476422 -0.0518242330 -0.0612590205 -0.0384748598 -0.0675222063 0.0164963525 -0.0396456252 0.0057267605 0.0005835896 0.0009142478 -0.0462779670 0.0511422711 -0.0090685686 0.0740354952 0.0022943644 0.0004698100 -0.0000159838 0.0015063039 -0.0083030843 0.0530332574 0.0010193963 0.0000543156 -0.0001426987 -0.0267803294 0.0413290572 0.0238434914 -0.0639613681 0.0245884977 0.0338983820 -0.0790687309 -0.0541444622 -0.0082115601 0.0073059714 0.0031126249 0.0074310482 0.0081457075 0.0011831788 -0.0052583460 0.0124994323 0.0026533361 -0.0056201720 0.0103290753 0.0047209050 -0.0041747441 0.0629867788 0.0542540622 0.0043325316 0.0233567018 -0.0646362911 -0.0461158811 -0.0024216571 -0.0180057051 0.0059597130 0.0077449101 -0.0135823946 0.0144167138 -0.0328918102 0.0362204954 0.0020095015 -0.0163440232 -0.0145609655 0.0141326715 0.0038336031 0.0257889394 -0.0237347920 -0.0197496666 0.0040208244 0.0017313201 -0.0118001452 -0.0168552145 -0.0041064493 -0.0015787271 0.0220339698 0.0307586649 -0.0110793864 -0.0277248491 -0.0233408271 -0.0352345604 -0.0254192116 -0.0106326821 -0.0009950191 -0.1733214475 -0.1001653252 -0.0298493948 -0.0279326599 0.0029594621 0.0012197054 -0.0004962314 -0.0002459659 -0.0004905735 -0.0003860724 0.0007885607 -0.0004844462 0.0000812884 -0.0008495953 0.0000861281 -0.0003864367 0.0001822692 -0.0002369742 0.0013105746 0.0005743090 0.0000228475 0.0000401691 0.0000806808 -0.0011990321 0.0041521965 -0.0045492826 0.0011246845 -0.0036921613 -0.0008020939 0.0001930411 0.0002208023 -0.0004300905 -0.0030001507 -0.0018987100 0.0028357437 0.0005971200 -0.0008408636 0.0000312582 -0.0009516714 0.0022041546 0.0015141367 0.0006507893 -0.0021310602 -0.0006620422 0.0010434982 0.0013950933 0.0006160397 -0.0012570843 0.0005870571 0.0014617174 0.0005679521 -0.0006225121 -0.0012935961 0.0048052526 -0.0051519826 0.0041240298 -0.0161355271 0.0068647489 -0.0182549879 0.0001739048 -0.0011314443 0.0008158695 -0.0047927171 -0.0057119879 0.0040862804 -0.0027280435 -0.0004125718 -0.0049499862 -0.0001115545 -0.0000518832 -0.0001693669 0.0001590861 0.0001252742 0.0003850967 -0.0007789713 0.0005517325 0.0004936574 0.0005272688 0.0000457210 -0.0012618824 -0.0003796015 0.0003436020 -0.0000519830 -0.0023869991 -0.0009248337 0.0006816456 0.0003764971 0.0019036804 -0.0005670355 -0.0002405744 0.0000364469 -0.0002572026 0.0011154598 0.0013542201 -0.0021304042 -0.0000656488 0.0012064933 0.0014196445 0.0004606977 -0.0001760045 0.0002001063 0.0018613907 -0.0013154132 0.0000570614 0.0008000625 -0.0006993725 -0.0007801303 0.0023784984 -0.0006966295 0.0005067152 -0.0007036934 0.0002576115 -0.0013517475 0.0000708674 -0.0005267931 -0.0000978937 -0.0007549028 0.0007693913 0.0006371366 0.0015081415 0.0003230273 -0.0000073210 0.0060784276 -0.0020405693 -0.0028591546 -0.0042959092 0.0028224884 0.0043701074 -0.0012159509 -0.0001942228 0.0011222344 0.0008181399 -0.0005531690 -0.0007889791 0.0059372630 -0.0038598435 -0.0029996979 -0.0059722149 0.0024439337 0.0035512973 -0.0153603637 0.0285895235 0.0619294487 0.2571884905 0.2148524737 -0.0966629027 -0.1341253825 -0.1573863583 -0.1120677206 -0.0690769093 -0.1758186826 -0.0764344273 0.0764926072 -0.0222833762 0.0241622093 0.2735148568 -0.1587535929 -0.1676757524 -0.0289348191 -0.0294355727 -0.1078928479 -0.1446293429 0.0702305496 -0.0572536717 0.0157094932 -0.0198756768 0.0093687786 -0.0501801396 0.0200659459 0.0385671911 -0.0041270838 -0.0005549306 -0.0083650014 -0.0266411177 -0.0037341848 0.0079267670 -0.0024815071 -0.0027835745 0.0004710047 -0.0017602698 -0.0001179947 -0.0011030272 -0.0174302032 0.0081719917 -0.0234937876 -0.0239299248 0.0157203937 0.0157666858 0.0162801277 0.0112333922 -0.0054431075 0.0838138705 -0.0820154714 -0.1025160159 0.0164290258 -0.0061724948 0.0149537715 0.0214073570 0.0112999377 0.0001186936 -0.0020361858 -0.0005997852 -0.0003919291 -0.0014967651 -0.0004183188 -0.0013274055 -0.0038613811 0.0002278046 0.0030282889 -0.0048853918 0.0018272222 0.0066601165 -0.0083533188 0.0041276289 -0.0162689089 0.0026040972 -0.0021726277 0.0016271503 -0.0006604084 -0.0012307373 -0.0004418836 -0.0022924118 -0.0015701216 0.0009624403 0.0005984903 0.0046930509 -0.0029806961 -0.0020204497 -0.0016051404 0.0024639244 -0.0001415853 0.0022372579 -0.0005552619 -0.0013222217 -0.0122037317 -0.0020073562 0.0144420426 -0.0024303750 0.0154942205 -0.0074483730 -0.0037082848 -0.0080832860 0.0006578046 -0.0019177937 -0.0006701155 0.0006070252 0.0015507695 -0.0017812242 0.0070012062 -0.0044316635 0.0119094586 0.0005969644 -0.0001352901 0.0006445468 0.0001053076 0.0004902442 0.0003926742 -0.0006713689 -0.0007734397 0.0002317802 0.0001274667 0.0001840182 -0.0005846396 -0.0000040503 -0.0005442825 0.0004762203 -0.0003678960 0.0002908115 -0.0005866232 -0.0014318739 -0.0004631597 -0.0006714231 0.0012019328 0.0021087900 0.0017850048 -0.0007671555 -0.0005527147 -0.0027525236 0.0015651923 0.0004700854 0.0041712206 0.0000733204 0.0013856509 -0.0022168666 0.0015666340 0.0011365690 0.0057510484 -0.0094745265 0.0153639765 -0.1477518104 0.0128951933 0.0047083239 0.0033629011 0.0005106354 0.0001700827 0.0000100310 0.0004111017 -0.0001520755 -0.0002105449 0.0002510683 0.0001120586 0.0000532872 -0.0002974851 -0.0002136156 -0.0003881470 -0.0001513240 0.0005739867 0.0003092889 -0.0000766693 0.0001953471 0.0006395986 0.0002819677 0.0000581153 0.0001143635 -0.0001483254 -0.0002254841 -0.0000362510 -0.0000702565 0.0002863192 0.0001772282 -0.0006273312 0.0004889677 0.0003699684 0.0012902872 -0.0022580151 -0.0005195305 0.0014697007 -0.0027068768 -0.0014054673 0.0005074937 0.0004627474 -0.0007217824 -0.0004375815 0.0003166254 -0.0030468064 -0.0000209808 -0.0011730542 0.0015411921 -0.0002846731 -0.0005563100 -0.0004562621 -0.0002173157 0.0009417068 0.0007679869 -0.0004399905 0.0000716651 -0.0000185492 0.0000927445 0.0002919056 0.0002172959 -0.0000533020 0.0004411236 0.0002499614 -0.0000067811 0.0004036895 0.0000972785 0.0181379973 -0.0038865641 -0.0032850806 -0.0024380436 -0.0024629194 0.0016235233 -0.0130091790 -0.0047006758 -0.0160545062 0.0034004956 -0.0009289002 -0.0005048706 -0.0053953188 0.0123912893 0.0164162426 -0.0007731528 0.0018369398 -0.0006228270 0.0098009461 0.0104938901 -0.0091742415 -0.0222484500 -0.0135302735 -0.0035789029 -0.0019415642 0.0003730520 0.0005198552 -0.0020305656 0.0282799618 0.0034371781 -0.0021662097 -0.0049765631 0.0050602435 -0.0048858667 0.0053180264 0.0006267730 -0.0094296682 -0.0109282336 0.0124520558 0.0004137438 0.0051517463 -0.0010483086 0.0041167482 -0.0112994964 -0.0111080594 -0.0045636440 0.0061950486 -0.0010957826 0.0178911577 -0.0309196880 0.0128161753 -0.0401808311 0.0390413457 -0.0090310094 -0.0003941468 -0.0031281048 0.0007615332 -0.0163318632 0.0419687258 -0.0277315473 0.0173206760 -0.0367856785 0.0095573338 0.0010274024 0.0013866696 0.0024012656 -0.0003124590 -0.0014379538 -0.0025630200 0.0010438864 -0.0002405711 -0.0021252816 -0.0009219261 0.0013381364 0.0018241127 -0.0029684578 0.0085174703 0.0048529020 -0.0232186474 -0.0077901032 0.0114690703 -0.0005953614 0.0054481150 -0.0281899037 0.0003584224 0.0064251195 0.0181560000 0.0346286639 0.0614068947 0.1118087546 -0.0205013163 -0.0342814239 -0.0990903120 0.0013558858 -0.0106988641 -0.0172607306 0.0178775461 -0.0047328483 0.0131329034 0.0480898666 0.0340142998 0.1098817364 0.0076253580 -0.0308061167 -0.0775388622 0.0004027388 -0.0024648418 -0.0345376062 0.0181303200 -0.0195013049 -0.0159706599 -0.0639910018 0.0306946125 0.0488791119 0.0579480873 -0.0098558117 -0.0221417410 0.4162563124 -0.1760365223 -0.2020663845 -0.2625785625 0.1433197924 0.1857091642 -0.0759270250 0.0244187911 0.0631600361 0.0536686763 -0.0265134629 -0.0469945517 0.4287537753 -0.2333622100 -0.2341433008 -0.3325522295 0.1752260165 0.2034809834 -0.0005723967 -0.0005208822 -0.0009597512 -0.0035890973 -0.0040901178 0.0019073803 0.0000592687 -0.0001121397 0.0024299271 0.0019748226 0.0028149016 0.0010114994 -0.0002472145 0.0006147181 -0.0002073206 -0.0025984474 0.0005099465 0.0013614333 0.0032129979 -0.0021423790 0.0000633751 -0.0017781363 -0.0001363344 0.0012075662 0.0197469835 -0.0256681933 0.0117976223 -0.0718712690 0.0169145627 0.0294458543 -0.0057783204 -0.0005241121 -0.0063659358 -0.0448217426 -0.0092290796 0.0235247470 -0.0049479640 -0.0029904664 -0.0036551856 -0.0102489385 0.0029297764 0.0025956726 -0.0174390574 -0.0034374851 -0.0477948659 -0.0013126884 -0.0034615073 0.0069542680 0.0318323201 0.0235355730 -0.0052884954 -0.0322050298 -0.0244663723 -0.0401262349 0.0251728600 -0.0076782852 0.0224648278 0.0354566060 0.0189805923 0.0010756894 -0.0022011214 -0.0025974818 -0.0015023763 -0.0019672102 0.0008642423 -0.0038486211 -0.0066014930 -0.0006473665 0.0094167636 -0.0123672631 0.0055132565 0.0090662293 0.0448869960 -0.0214516809 0.0673405404 -0.0064854888 0.0033221020 -0.0129565156 -0.0008034526 -0.0024633256 -0.0019897965 -0.0004196687 -0.0060894479 0.0103427933 0.0130326886 0.0024689552 0.0119992763 -0.0087957325 0.0000728791 -0.0038587814 0.0010378170 0.0033830980 -0.0007563107 -0.0342728755 -0.0150110522 -0.0579129055 -0.0359692213 0.0306641147 -0.0843291096 0.0201869812 -0.0244802918 0.0360259306 0.0010030987 -0.0030606208 -0.0016564432 0.0016657220 0.0028279991 -0.0015879734 0.0041381716 0.0003344961 0.0091904487 0.0006211109 0.0005031382 0.0005197011 0.0004297951 0.0003888527 0.0000575732 -0.0006015643 -0.0009473533 0.0007896051 -0.0006661127 -0.0000056598 -0.0003578170 -0.0001700345 -0.0014829943 0.0009214172 -0.0003486324 0.0004074181 -0.0011342477 -0.0025499354 -0.0002620151 -0.0035003773 0.0002164983 0.0030938572 0.0017396071 -0.0013526368 -0.0017526626 -0.0054222745 0.0028863367 0.0010084990 0.0067371761 0.0018196442 0.0018031472 -0.0021615359 0.0024905273 0.0016650271 0.0113548877 -0.0193121103 0.0288081100 -0.2845212416 0.0068256218 0.0297513331 -0.0007625070 0.0002094294 0.0001856658 0.0007532865 -0.0003730974 -0.0002138437 0.0000279261 -0.0006795880 -0.0003137086 -0.0000201038 0.0002249707 -0.0005963389 0.0000244102 -0.0001851586 0.0003816121 0.0000228609 -0.0004421162 0.0007173849 0.0007527024 0.0000430137 0.0005332331 -0.0003205675 0.0006016507 0.0005386881 0.0000887797 0.0002340359 -0.0005661842 -0.0004496273 -0.0010077234 0.0006336337 -0.0001721224 -0.0003322565 0.0005738659 0.0001532454 0.0000214241 -0.0005261615 -0.0005932658 0.0013400356 0.0016194879 -0.0025880994 -0.0005693653 -0.0004265651 -0.0052456707 0.0012870386 -0.0020329287 0.0020916178 -0.0002827488 0.0007305801 0.0017429760 0.0000755130 0.0002315614 0.0013679864 0.0000775552 -0.0017597403 -0.0012642077 -0.0004319375 0.0002080384 0.0003475096 -0.0000601498 -0.0018768313 -0.0010185262 -0.0005261067 0.0002092580 0.0002475344 0.0244749065 -0.0049767945 -0.0048694764 -0.0037717735 -0.0041114867 0.0056234437 -0.0164490758 -0.0044242482 -0.0247495265 0.0048687426 -0.0026381892 0.0001471506 -0.0062271943 0.0189466123 0.0216021448 -0.0022926484 0.0002496697 -0.0011314752 0.0232772443 0.0256630567 -0.0184786785 -0.0340824501 -0.0355599917 0.0068163842 -0.0028166823 0.0013761609 0.0002836083 -0.0039013102 0.0287665766 0.0147942020 0.0018598968 -0.0031394350 -0.0019003325 0.0103651394 -0.0304043573 0.0160639740 -0.0351081392 0.0352117971 -0.0027790786 0.0149167159 -0.0347325304 0.0080478106 -0.0503182155 0.0851328579 -0.0442251266 0.0465010650 -0.0850303010 0.0195398331 -0.1042883797 0.1553600049 -0.0402862927 0.0914102284 -0.2579076741 0.0687524189 -0.0057042501 0.0201895678 -0.0085556413 0.2189071157 -0.5421266870 0.1394248790 -0.2294887933 0.4648929369 -0.1256726985 0.0014056204 0.0019480178 0.0036953210 -0.0006421581 -0.0022738640 -0.0037359889 0.0028521881 -0.0016454516 0.0046477105 -0.0002419695 -0.0041665306 0.0021892462 -0.0057178089 0.0095879702 0.0037349706 -0.0429833171 -0.0180797813 0.0138160472 0.0031127070 0.0242553071 -0.0307592609 -0.0025521861 0.0055026851 0.0155960195 0.0418780088 0.0682876216 0.0775811711 -0.0203813980 -0.0246995114 -0.0822393250 0.0047115859 -0.0074281393 -0.0132916790 0.0332456066 -0.0175158731 0.0107375555 0.0477972761 0.0233600926 0.0783788946 0.0288500772 -0.0338745489 -0.0541694910 -0.0283695531 0.0111025985 -0.0397178384 -0.0048277050 -0.0044561825 -0.0001534166 0.0150934108 -0.0016784370 -0.0028184173 0.0197694001 0.0299571760 0.0201565215 -0.0475372734 0.0358772892 0.0458012894 0.0532669687 0.0099492354 0.0098107074 0.0092033489 -0.0351142052 0.0096673097 -0.0154308071 0.0027880860 0.0037196954 -0.0687373452 0.0137626426 0.0762389893 0.0585394324 -0.0510298150 -0.0455820287 -0.0004098384 -0.0001754636 -0.0008021986 -0.0021457375 -0.0033395709 0.0017239186 -0.0003448264 -0.0006278302 0.0016371063 0.0018871069 0.0016907116 0.0000997350 0.0000153690 0.0017766150 -0.0005877529 -0.0040725202 -0.0041527645 0.0000019025 0.0031613003 -0.0014273978 -0.0010890918 -0.0010480831 -0.0021681643 0.0047104213 -0.0271746876 0.0351320846 -0.0166494244 0.0993625270 -0.0266876079 -0.0496584429 0.0081171765 0.0016100000 0.0105808593 0.0645291849 0.0147753901 -0.0306539295 0.0081948638 0.0028840061 0.0043335714 0.0076226177 -0.0093009543 0.0051479285 0.0200592066 0.0029478760 0.0622636212 -0.0045832863 0.0183385617 0.0166885091 -0.0235350410 -0.0498871976 -0.0065655464 0.1601412909 -0.0170487945 0.0240727756 -0.0369906999 0.0143252409 -0.0357470904 -0.0500343973 -0.0254124966 -0.0005921595 0.0026078462 0.0025936926 0.0002898628 0.0032157961 -0.0000618835 0.0047751614 0.0101986495 0.0002297055 -0.0113277306 0.0153521427 -0.0055666103 -0.0179055422 0.0638676527 -0.0343950815 0.1148531244 -0.0151161556 0.0109768235 -0.0156267039 0.0017430375 0.0039484776 0.0007287077 0.0097449378 0.0027462612 0.0026219269 0.0054883255 -0.0179738985 0.0197498467 0.0030861191 0.0065065353 -0.0121876706 0.0009571567 -0.0071915071 0.0019232326 -0.0165531391 0.0442637879 -0.0286263990 -0.0828820184 0.0293419365 -0.1174367084 0.0423398066 -0.0000309717 0.0541153184 -0.0024226773 0.0061477924 0.0019666494 -0.0016883917 -0.0049224665 0.0054144618 -0.0178248234 0.0102739602 -0.0324009290 -0.0017978526 0.0000901310 -0.0019379625 -0.0003737456 -0.0015341728 -0.0010213243 0.0018599585 0.0023346951 -0.0010009679 -0.0000438621 -0.0004061360 0.0017807512 0.0000613605 0.0018251849 -0.0015639380 0.0010687289 -0.0008271289 0.0019611949 0.0047039254 0.0013151785 0.0040382889 -0.0034746552 -0.0052826127 -0.0057787738 0.0024651942 0.0018945082 0.0087483421 -0.0051388359 -0.0012991534 -0.0132788304 -0.0007293302 -0.0041998057 0.0061452926 -0.0040026567 -0.0034362480 -0.0172554890 0.0278258104 -0.0466354418 0.4498463306 -0.0460812967 0.0041675017 -0.0186975740 0.0012155994 -0.0032397277 -0.0019067032 0.0036600551 0.0015669148 -0.0006733841 0.0061011503 0.0033020111 0.0002418525 -0.0009487442 0.0001134380 0.0003933497 0.0001318620 -0.0010112036 -0.0004439951 0.0001033285 -0.0007311357 -0.0012853005 -0.0007446971 -0.0004301113 0.0000982865 -0.0042957875 -0.0039189557 -0.0004892516 -0.0018398512 0.0036700577 0.0029052704 0.0020991502 -0.0012406442 0.0001179458 -0.0019099440 0.0028507281 0.0008819897 -0.0008587529 0.0028540774 0.0020900196 -0.0009449401 -0.0013532491 0.0000011066 0.0009206292 -0.0001181414 0.0098215084 -0.0012006919 0.0032333989 -0.0035790851 0.0007145238 0.0008951097 0.0000116269 0.0001763501 -0.0019169123 -0.0023467091 0.0008125493 0.0013912215 0.0012374548 0.0037482540 -0.0010725720 -0.0016600030 0.0004597503 0.0136125808 0.0075536309 0.0036823157 -0.0007150299 -0.0021926225 -0.0344065942 0.0069344384 0.0068110410 0.0054386733 0.0058828285 -0.0095517613 0.0229049109 0.0054684845 0.0362288993 -0.0069519945 0.0042767832 -0.0006794614 0.0079186142 -0.0279329990 -0.0297972447 0.0040899177 0.0013940562 0.0019394998 -0.0382164552 -0.0412467717 0.0280863191 0.0500239084 0.0575532304 -0.0146042085 0.0039862933 -0.0023337551 -0.0002209104 0.0054103852 -0.0337741982 -0.0278298869 -0.0058083552 0.0011041605 0.0091889894 0.0115931586 -0.0186254440 0.0073153416 0.0243608864 0.0304228434 -0.0414623058 0.0012208528 -0.0260165405 0.0026149043 -0.0313547116 0.0745807316 0.0275879331 0.0357075396 -0.0592359659 0.0160236580 -0.0635979425 0.1061877530 -0.0343924062 0.1063291629 -0.1314026048 0.0077359007 0.0010096495 0.0143911287 -0.0033634020 0.1514461402 -0.3387745204 0.1512707006 -0.1637174050 0.3277955939 -0.0878577976 -0.0020109108 -0.0027564032 -0.0053651086 0.0010375099 0.0033408378 0.0054164758 -0.0028604877 0.0013583016 0.0091867188 0.0031336753 -0.0052668314 -0.0059544822 0.0079981734 -0.0136842337 -0.0068150305 0.0619829799 0.0252329200 -0.0220010862 -0.0037419309 -0.0326517136 0.0505921567 0.0029517831 -0.0100417495 -0.0287472276 -0.0663713573 -0.1121439759 -0.1458610926 0.0353942511 0.0494143252 0.1529358367 -0.0060916178 0.0118451984 0.0234427112 -0.0477562321 0.0251659483 -0.0163299212 -0.0766749264 -0.0424907872 -0.1353729760 -0.0402223322 0.0509952456 0.0821394626 0.0372884666 -0.0163315938 0.0489860222 0.0213188909 0.0072298368 -0.0022580454 -0.0356836631 -0.0005987500 0.0182316053 -0.0131284355 -0.0410032180 -0.0313076534 0.1460103504 -0.0976327733 -0.1059912410 -0.1279197180 0.0185019789 0.0279006869 -0.0304984741 0.0524119117 0.0010958476 0.0260331483 -0.0079208727 -0.0235858847 0.1846614835 -0.0697963138 -0.1549633779 -0.1496565595 0.1002331604 0.0906793538 0.0045637646 -0.0034055202 0.0007454601 -0.0109736236 0.0038361991 -0.0036934461 0.0169197207 0.0226737341 -0.0062456307 -0.0181525164 -0.0063974624 0.0026356446 -0.0046610465 0.0001558691 -0.0003374814 -0.0099673411 0.0069206634 0.0060892654 -0.0084828180 0.0073980915 0.0054244162 0.0090048457 -0.0032681536 0.0014883244 0.0064883060 -0.0094877439 0.0081926098 -0.0594841112 -0.0144593315 -0.0392850191 -0.0111158636 0.0026640035 0.0114310673 -0.0105726142 0.0033587022 0.0081483332 -0.0041614378 -0.0025376097 -0.0033512404 -0.0017229579 0.0002118052 0.0003977748 -0.0018212272 0.0009277473 -0.0102671897 -0.0015085388 0.0008961084 0.0000572344 0.0025931876 0.0030636046 -0.0003149806 -0.0022736882 -0.0048249872 -0.0096388155 0.0062822898 -0.0026366845 0.0042651131 0.0143474517 0.0090870290 0.0002472544 -0.0030056808 -0.0000688193 -0.0032040445 -0.0006131763 -0.0008363785 -0.0004731231 0.0012934366 -0.0010930975 0.0043235818 -0.0010694685 0.0006867780 -0.0010287548 -0.0022724237 0.0024397359 -0.0027149684 -0.0002969834 0.0007387490 0.0012305398 0.0000341806 0.0002817931 -0.0000643028 0.0001116984 0.0004659636 -0.0004511822 -0.0006334222 -0.0005651880 -0.0004266913 0.0014318052 0.0003194890 -0.0004723196 -0.0007344741 -0.0018484700 0.0000347801 0.0016013779 0.0010245217 0.0028186718 0.0010348085 -0.0014654342 0.0026337661 0.0004630776 0.0022089306 -0.0014812284 0.0002700590 0.0002027575 0.0000943115 -0.0001150225 0.0001229335 -0.0000960229 0.0004336741 -0.0003917192 0.0008210818 0.0000300219 -0.0000885991 -0.0003852148 0.0003518243 -0.0010681964 -0.0005767872 0.0018506748 0.0010340412 0.0017888021 -0.0017806244 -0.0000069201 -0.0001858041 0.0012818841 0.0000725242 0.0017637170 -0.0015786916 0.0001892768 -0.0019980835 -0.0029110763 0.0026030650 -0.0115309183 -0.0005314194 -0.0012973742 0.0027197353 -0.0035255696 0.0010194508 -0.0119401561 0.0044993130 -0.0028816461 0.0124571643 0.0010329716 -0.0011961451 0.0006406307 -0.0007831943 -0.0007729700 -0.0005409326 0.0013527217 0.0017751386 0.0164465291 0.0030453272 0.0007476331 0.0010216014 0.0005854811 -0.0006382362 -0.0003400831 0.0010734585 0.0005267295 -0.0001739501 0.0016117872 0.0007245077 0.0000786526 -0.0006243291 0.0002348982 -0.0003746841 0.0001053641 0.0000429843 0.0002076711 0.0000142225 -0.0008509831 0.0003200245 0.0001726560 -0.0002917217 0.0003001736 -0.0010644626 -0.0011412965 -0.0001636618 -0.0004741731 0.0010709646 0.0007739413 0.0000015704 -0.0000366101 0.0002859146 0.0008314403 -0.0013583699 -0.0002241707 0.0007615270 -0.0014946048 -0.0005965577 -0.0007581866 -0.0007864785 0.0024672342 -0.0000990038 0.0010457535 0.0016026021 -0.0013601427 0.0009745048 -0.0008008755 -0.0006468776 -0.0013584518 -0.0013827844 0.0000675750 0.0000165230 -0.0001383696 -0.0005982234 0.0018489263 0.0010499170 0.0010639550 -0.0001787417 -0.0004143841 0.0001189452 0.0035722058 0.0019764880 0.0008866890 -0.0000478631 -0.0005155535 0.0282969282 0.0090305247 -0.0204595881 -0.0193966038 -0.0281511070 0.0536097650 0.0062057746 0.0371494702 -0.0666785452 0.0064905604 -0.0314889166 0.0215616274 0.0227525845 0.0858571702 -0.0270166738 -0.0330334615 -0.0670231478 0.0370435375 0.1220751814 0.2392879479 -0.1902025021 -0.0878979289 -0.3410537741 0.2129548454 -0.0046696909 0.0198209396 -0.0111826874 -0.1429434758 -0.3356032606 0.3308280848 0.1829682062 0.2805339019 -0.3170214964 -0.0007586407 0.0009958876 -0.0004152371 -0.0021880774 -0.0018917659 0.0030330464 0.0001950338 0.0008526731 -0.0000579101 0.0006368035 -0.0020860307 -0.0031451904 -0.0009166293 0.0010499019 0.0000187166 0.0039626352 -0.0058439154 0.0018724549 -0.0067706274 0.0071516266 0.0003791561 -0.0001977705 -0.0004580980 0.0000010725 -0.0019123412 0.0058174290 -0.0057526648 0.0032814812 -0.0056490402 0.0025192770 0.0020518038 0.0007029766 0.0092843979 -0.0038920097 -0.0077010598 -0.0056816745 0.0003254102 -0.0001681126 -0.0005591957 -0.0002642529 0.0002688874 0.0005569958 -0.0109207719 -0.0003777339 -0.0124310123 -0.0127564606 -0.0078710484 -0.0060408958 0.0077716468 0.0255140296 0.0467052541 0.0040298229 -0.0075541710 -0.0501667416 -0.0542110387 -0.0990848244 -0.2704344566 0.0497439673 0.1162176457 0.2416307363 0.0064006009 0.0000340967 0.0389478163 0.0073908771 -0.0128202682 -0.0130032462 -0.0612580703 -0.0873177714 -0.1943648824 0.0263122246 0.0230155096 0.0872039605 -0.0046233358 0.0019134313 -0.0082958961 0.0004224075 -0.0018998327 -0.0013915911 -0.0031804615 0.0012656220 0.0035358174 0.0067811759 0.0051001646 0.0024445682 0.0237767772 -0.0094714217 -0.0091000359 -0.0049138718 0.0108134931 0.0106736152 -0.0057516735 -0.0039023981 0.0077248488 0.0039426174 -0.0024190575 -0.0042761907 0.0295054829 -0.0205868902 -0.0098197987 -0.0275515267 0.0120976829 0.0161056838 0.0006022582 -0.0010467663 -0.0002208694 -0.0037804054 -0.0010375125 0.0000353407 0.0035239674 0.0047050849 -0.0000997987 -0.0029423331 -0.0002178311 0.0010060552 -0.0011523379 0.0001734227 -0.0003160297 -0.0036748544 0.0022739562 0.0022286237 -0.0000058085 0.0007123970 0.0017854501 0.0017715252 -0.0009461972 0.0006588991 0.0147585322 -0.0232422508 -0.0039868851 -0.0425506899 -0.0367895993 -0.1238016787 0.0062556998 0.0175810994 0.0228304979 -0.0216980083 0.0024121833 0.0172053896 -0.0030829398 -0.0027500103 -0.0009112583 -0.0043996696 0.0007064595 -0.0011306926 -0.0093427415 0.0024984645 -0.0266160328 -0.0025870749 -0.0005332746 0.0003640485 0.0094666898 0.0122840326 -0.0000688950 -0.0184640024 -0.0116230630 -0.0242029400 0.0126162661 -0.0037495651 0.0132993354 0.0158931467 0.0071050290 -0.0003575654 0.0012574848 -0.0014847542 0.0020070996 -0.0004078899 0.0013243958 -0.0032870896 -0.0061562485 -0.0001269016 0.0052224311 -0.0073703253 0.0029325614 0.0149031517 -0.0171385564 0.0097019388 -0.0349581317 0.0054061288 -0.0044125460 0.0034996649 -0.0010228318 -0.0021297303 -0.0006704491 -0.0041465442 -0.0027928625 0.0009856669 0.0006454545 0.0082773521 -0.0056736360 -0.0042354894 -0.0030352671 0.0045436333 0.0003848638 0.0050126998 -0.0009469808 -0.0004242752 -0.0238507568 -0.0015338694 0.0274326338 -0.0056238602 0.0307277669 -0.0134347096 -0.0075536746 -0.0136108841 0.0007973360 -0.0030655198 -0.0008028974 0.0007206858 0.0026059548 -0.0037332293 0.0164815636 -0.0120272552 0.0264540308 0.0011250305 -0.0004170813 0.0015330361 -0.0001038791 0.0017324531 0.0013260104 -0.0023540884 -0.0022472552 -0.0004490206 0.0017066846 0.0005228746 -0.0013411463 -0.0006626963 -0.0008593931 -0.0001025344 0.0001088990 0.0004898124 -0.0001427288 -0.0014363919 -0.0024822195 0.0042352396 0.0035064745 0.0048712685 0.0025074289 0.0001756480 -0.0011172603 0.0016210682 0.0007213433 0.0023810087 0.0016744491 -0.0013415109 0.0035019259 -0.0053658444 0.0023869034 0.0021728859 0.0102900501 -0.0170149469 0.0255877528 -0.2686929592 0.0104706459 0.0033000781 0.0036191932 -0.0011189424 0.0022931229 0.0016139210 -0.0029451165 -0.0019901249 0.0002086064 -0.0049652289 -0.0023961676 -0.0001455258 0.0012726772 -0.0000892895 0.0000438510 -0.0002909176 0.0003751638 0.0000448753 -0.0002752933 0.0008535987 0.0005257623 0.0001509452 0.0004537562 -0.0002417047 0.0033864601 0.0033942869 0.0005314269 0.0015258208 -0.0029913954 -0.0024111572 -0.0005669173 0.0006597796 -0.0002209191 -0.0001160029 0.0002985318 -0.0003456628 0.0001437961 -0.0000981685 -0.0002023354 0.0017651891 0.0018105998 -0.0016759074 -0.0005303256 -0.0009230060 -0.0060936276 0.0019430984 -0.0024024910 0.0022610754 0.0000972635 0.0006044134 0.0009464564 0.0000449391 0.0005049476 0.0008545110 0.0001035450 -0.0018663314 -0.0012619322 -0.0033560256 0.0013112181 0.0017761241 -0.0004016152 -0.0113886620 -0.0062151964 -0.0032537293 0.0007511206 0.0020561764 0.0069140504 -0.0131580389 0.0077645379 0.0088695736 0.0146881022 -0.0251772322 -0.0187618916 -0.0270856324 0.0159175272 0.0005078517 0.0154723620 -0.0130445035 -0.0205783695 -0.0300650761 0.0370815436 0.0175270531 0.0408740344 -0.0218544822 -0.0516873829 -0.1175212212 0.0978195202 0.0249154146 0.1649483476 -0.1235690638 0.0003271655 -0.0101846895 0.0067366929 0.0723554520 0.2223628407 -0.1773574807 -0.1053450725 -0.1674069517 0.1858456477 -0.0014419480 0.0007480825 0.0000598767 -0.0092791270 -0.0030182795 0.0088602881 0.0014733456 0.0014604504 0.0002994250 0.0006245954 -0.0050833564 -0.0113135459 -0.0018120322 0.0017743440 -0.0003461085 0.0033635731 -0.0062623906 0.0029382733 -0.0139735047 0.0014706968 0.0055271641 -0.0009315952 -0.0006922456 -0.0002621497 -0.0036823978 0.0050208221 -0.0149513253 0.0054482158 -0.0102287446 0.0033520695 0.0000163941 0.0014478231 -0.0018814212 0.0018493215 0.0024259529 0.0000248481 0.0009966854 -0.0005284270 -0.0015062302 -0.0007545572 0.0006581187 0.0016535817 -0.0085654898 -0.0073933158 -0.0226999474 -0.0263216022 -0.0155306915 -0.0090368830 0.0132202004 0.0488912169 0.0777595462 -0.0068099749 -0.0175784056 -0.0806281139 -0.0882356751 -0.1643277011 -0.4631517532 0.0683593834 0.1936608832 0.4103728408 0.0111233688 0.0119298343 0.0612318848 0.0182726993 -0.0245880406 -0.0215117441 -0.1061428851 -0.1352544925 -0.3331107072 0.0516301658 0.0383674712 0.1438661682 -0.0135351420 0.0052868524 -0.0239363613 -0.0013919147 -0.0047295591 -0.0026243286 -0.0026259689 0.0033192264 0.0054101861 0.0160885696 0.0150978854 0.0084179867 0.0343911476 -0.0079765205 -0.0065170608 0.0024347302 0.0209302259 0.0210519222 -0.0082666339 -0.0138201301 0.0156228513 0.0044971671 -0.0041887511 -0.0059133066 0.0390594317 -0.0340373767 -0.0027233645 -0.0379927215 0.0110043832 0.0212308909 -0.0035651417 0.0031225519 -0.0014726851 0.0073096359 -0.0056125317 0.0044419688 -0.0134067021 -0.0183208829 0.0063319169 0.0176181851 0.0078820128 -0.0018297175 0.0034355097 0.0004694776 0.0003290383 0.0072136743 -0.0065593090 -0.0050206848 0.0058446021 -0.0052294654 -0.0047897100 -0.0068350832 0.0019259300 0.0002941314 -0.0011386434 0.0016201859 -0.0004245321 0.0043258252 -0.0001160064 0.0005823912 0.0002627309 -0.0001777301 -0.0001051328 0.0023825562 0.0001353084 -0.0012680028 0.0002138993 0.0000216752 0.0001814817 -0.0014740655 0.0016876035 0.0005939155 0.0014068268 -0.0001947471 0.0021489242 -0.0004408909 0.0031001064 0.0060487835 0.0034841726 -0.0058567421 -0.0034613732 0.0260945806 -0.0125180414 -0.0098658224 -0.0015322846 0.0002623894 -0.0020656523 -0.0022564286 -0.0013646713 -0.0003242521 0.0013034059 0.0002243802 0.0005238004 -0.0010551632 0.0001658147 0.0000364794 -0.0002811980 -0.0000132890 0.0003073861 0.0010191206 -0.0005528476 0.0039597096 -0.0543488123 0.0314570811 -0.0936170795 0.0103233826 -0.0063297701 0.0147429801 -0.0000196057 -0.0003232597 0.0008295511 -0.0039630293 0.0026304979 -0.0076846601 -0.0094676929 0.0052203872 -0.0140931122 0.0030809400 -0.0025541075 0.0063507042 -0.0008098816 0.0006831785 -0.0004261674 0.0287923808 -0.0122550296 0.0478593823 0.0522211120 -0.0288820858 0.0928170761 -0.0264920819 0.0129913432 -0.0387372266 0.0003835641 -0.0003505770 0.0002786383 -0.0005567576 0.0004176395 -0.0017880035 0.0082868340 -0.0076706399 0.0121072306 0.0005599078 -0.0006115599 0.0007469568 0.0000962162 0.0000554979 0.0003927077 -0.0002882293 0.0000053335 -0.0003700492 0.0001786092 0.0002090973 -0.0004192658 0.0001374182 0.0004071524 -0.0001272731 -0.0003869511 0.0000568958 0.0000877496 0.0005550611 -0.0003558706 0.0011655618 0.0010355446 0.0001562835 0.0013948359 0.0000982636 0.0005956576 0.0008973062 -0.0001074363 0.0000421331 0.0008249226 -0.0010358025 0.0004017672 -0.0021392964 0.0002978578 0.0004266616 0.0007103412 -0.0012672677 0.0027207002 -0.0261935728 -0.0078431089 0.0087672579 -0.0002295230 -0.0027514795 0.0014209853 0.0023560606 -0.0042273340 -0.0025088354 0.0002456192 -0.0063613770 -0.0030607364 -0.0001209869 0.0026033576 0.0005600845 0.0006313128 -0.0004063371 -0.0012994892 -0.0007245549 -0.0007661930 0.0001089724 -0.0002633502 -0.0007297242 0.0005005393 -0.0003644557 0.0040601263 0.0045254362 0.0008434677 0.0019383558 -0.0040643649 -0.0031586635 0.0019316792 0.0001763185 -0.0012553577 -0.0046637346 0.0078664740 0.0008456545 -0.0016650704 0.0055661044 0.0037152489 0.0017545514 0.0016799877 -0.0010429174 0.0001202768 -0.0016761895 0.0018305543 0.0020021228 -0.0000444059 -0.0008478005 0.0005482431 0.0022019073 0.0025019970 0.0009980852 -0.0026786208 -0.0013922017 0.0012819005 -0.0019076998 -0.0010500137 -0.0043117924 0.0012448507 0.0019100959 -0.0003894511 -0.0141115017 -0.0077770723 -0.0040497086 0.0005113744 0.0024976525 -0.0013700246 0.0006134332 -0.0000636800 0.0003711873 0.0005080414 -0.0007413416 0.0008953579 0.0002511604 0.0019247062 -0.0002483363 -0.0002650253 0.0003470845 0.0011631790 0.0005416260 -0.0032558914 -0.0006827369 -0.0018876086 0.0018060105 -0.0013017477 -0.0033203354 0.0029519902 0.0011265228 0.0043865011 -0.0001089415 0.0001403336 0.0001977915 -0.0001945923 -0.0051551486 -0.0129546235 0.0076186171 0.0050006163 0.0107435120 -0.0090695439 0.0474015194 -0.0910493471 0.0365674284 -0.0494007879 0.0989514656 -0.0340623896 0.0003433412 -0.0205197145 0.0014291206 0.0210228905 -0.0345508461 0.0159607042 -0.0183513318 0.0397029787 -0.0197246349 -0.2647874522 0.5149025899 -0.1563964806 0.2729897629 -0.5998039664 0.1575853038 0.0008616493 0.0121760981 -0.0033755449 -0.0897522779 0.1986610700 -0.0519762208 0.1042954461 -0.2254108771 0.0374497687 -0.0000701585 -0.0001764717 -0.0001978249 -0.0000029949 0.0000578329 0.0002357210 -0.0009631992 -0.0002721015 0.0052205885 0.0000825971 -0.0033977571 -0.0015772923 0.0004362634 -0.0003275082 0.0001409294 0.0023304516 0.0010457872 -0.0005400358 -0.0002937402 -0.0017163377 0.0004438413 0.0001447755 -0.0000787330 0.0002316118 -0.0007889304 -0.0011137209 0.0021329548 0.0001224898 -0.0011613784 -0.0008866389 -0.0003503585 0.0001534117 -0.0002014702 -0.0017305218 0.0011764969 -0.0001091043 -0.0010180476 0.0007374932 0.0009685965 -0.0019764547 0.0010074728 -0.0001446514 0.0018133758 -0.0006438793 0.0027383501 0.0043861023 0.0014346062 0.0003724784 -0.0036416673 -0.0018598110 0.0027380897 0.0010327291 -0.0024417806 -0.0018634451 0.0139847387 -0.0113303772 -0.0095462927 -0.0133204219 0.0042292561 0.0070755115 -0.0033132226 0.0029081212 0.0009555649 0.0004132936 0.0001421735 -0.0042151687 0.0154119893 -0.0076589732 -0.0127241594 -0.0111508914 0.0068672465 0.0031121753 -0.0021611365 0.0050171183 0.0021142825 0.0216039005 0.0085786112 -0.0020625574 -0.0145411039 -0.0184679956 -0.0011722619 0.0106099103 -0.0022629251 -0.0055850773 0.0035766366 0.0014203413 -0.0025757757 -0.0012381166 -0.0097782442 -0.0032535690 0.0053557798 0.0001158263 -0.0020308626 0.0068090336 -0.0058192426 0.0056970620 0.0063311199 -0.0106792683 0.0023200632 -0.0319551251 -0.0013857814 -0.0047077727 -0.0026513975 -0.0001850000 0.0016780249 -0.0168720566 -0.0012364045 0.0063527656 -0.0013311196 0.0030534622 -0.0011867861 -0.0006189322 0.0010405813 0.0024031649 -0.0028165227 0.0009331027 -0.0143761995 -0.0004421768 -0.0005486996 -0.0031114787 0.0043494125 0.0071310505 -0.0000917569 -0.0207068512 -0.0003286897 -0.0110015847 0.0139974918 -0.0071023510 0.0076896452 0.0158644825 0.0089303414 0.0011813764 -0.0092198711 0.0026143982 -0.0058496596 -0.0020642920 -0.0033558967 0.0040187492 0.0047179096 0.0006913541 -0.0062120086 -0.0296004886 0.0110121437 -0.1173721853 0.1266137135 -0.0785343443 0.2279177372 -0.0264051263 0.0157750241 -0.0340749401 0.0038795975 -0.0030157679 -0.0025117507 0.0062369603 -0.0017128218 0.0200680706 0.0194129955 -0.0115362192 0.0301870813 0.0014159702 0.0083852515 -0.0125060408 -0.0002577327 -0.0070624738 -0.0001933363 -0.0660088690 0.0568503184 -0.0903010897 -0.1152429469 0.0623254277 -0.1921881954 0.0445354920 0.0056977501 0.0606733457 0.0057242990 -0.0023641468 -0.0097493565 0.0096251665 -0.0036562854 0.0314586289 -0.2077110841 0.1949339311 -0.2851213383 -0.0069036315 0.0124957848 -0.0112389223 0.0046824698 -0.0113376294 -0.0130577129 0.0122871049 0.0128573317 0.0040163102 -0.0214735886 -0.0076642834 0.0134824619 -0.0005020692 -0.0057007165 0.0020990454 0.0038164545 -0.0032495460 0.0011484783 0.0065312884 0.0144040951 -0.0237525904 -0.0383388173 -0.0270977082 -0.0217130836 0.0042852462 -0.0124375984 -0.0183418941 -0.0047392739 -0.0047104288 -0.0217720034 0.0300581560 -0.0178558212 0.0388929733 -0.0006934875 -0.0024430383 -0.0105323418 0.0183915728 -0.0288194863 0.3195176446 0.0067171058 0.0008603667 0.0027666590 0.0118163576 -0.0254892801 -0.0179834650 0.0380240956 0.0281444739 -0.0014839580 0.0578301120 0.0265767586 0.0009331906 -0.0200499405 -0.0082659702 0.0012255002 0.0049250710 0.0027484205 -0.0011551191 0.0050048617 0.0020340801 -0.0010117648 0.0023154305 0.0009784139 -0.0016523545 -0.0390230286 -0.0440826588 -0.0085873602 -0.0190518574 0.0388943376 0.0304542433 -0.0065034592 -0.0090876644 0.0048201987 0.0108978984 -0.0214295535 0.0091575473 -0.0118301787 0.0045219263 -0.0061893838 -0.0089210266 -0.0076562961 -0.0095869874 0.0000851338 0.0124425255 -0.0111871051 -0.0131718516 0.0015479997 0.0036590103 -0.0041056829 -0.0029261166 0.0033818984 -0.0043791355 0.0107148714 0.0143748511 -0.0040077104 -0.0039936903 -0.0042308361 0.0429875069 -0.0153999473 -0.0218733741 0.0041554308 0.1386738222 0.0759714906 0.0408603821 -0.0075489525 -0.0259576788 0.0127766164 -0.0045824556 0.0008766087 -0.0151505615 -0.0252218773 0.0385771372 0.0015839947 0.0195694900 -0.0492092109 0.0046893814 -0.0017500001 -0.0014430404 -0.0156019547 -0.0150127014 0.0524734901 0.0103130852 0.0303075643 -0.0413992467 0.0906757010 0.1800703870 -0.1501772406 -0.0461038089 -0.2188953215 0.1132231972 -0.0021384973 0.0001875384 0.0005267964 0.1073799013 0.2134040285 -0.1264753771 -0.0873088032 -0.2180642362 0.1567544113 0.0046348576 -0.0095050752 0.0016090292 -0.0113608284 0.0074148837 0.0039942937 0.0005496589 0.0028093256 -0.0002721184 0.0089524478 -0.0184307540 -0.0035802201 -0.0102956357 0.0150643487 -0.0034623092 -0.0215143473 0.0507456963 -0.0175364843 0.0171569949 -0.0528425013 0.0222048339 0.0010189929 -0.0019053715 0.0010977678 -0.0341067521 0.0950096469 -0.0379042275 0.0413189975 -0.0868637751 0.0233972415 0.0002068604 0.0021400232 0.0033208537 -0.0003833346 -0.0011153890 -0.0025256079 -0.0005294658 0.0005238134 0.0003858111 -0.0001262365 0.0003616147 -0.0008957779 -0.0042007204 0.0017713361 -0.0011898783 -0.0173262657 -0.0068337175 0.0043852939 0.0023898778 0.0132857991 -0.0017956297 0.0003594107 0.0015632985 -0.0040478132 0.0011786558 0.0053672250 -0.0235201676 0.0016032166 0.0147404520 0.0136802386 0.0022958110 -0.0022865863 0.0024358586 0.0128509072 -0.0095906296 0.0012033153 0.0025452475 -0.0074223916 -0.0083184550 0.0140608526 -0.0094441359 0.0018070211 -0.0076391889 0.0037513782 -0.0119078416 -0.0023419277 -0.0015361975 -0.0008130819 0.0019644211 -0.0004183771 0.0001026351 0.0068973603 0.0085678463 0.0046919688 -0.0041229133 0.0045168244 0.0065414221 0.0078350189 0.0090037356 0.0041104106 0.0008360286 -0.0106209741 0.0048771352 -0.0018919537 0.0002744858 0.0009057984 -0.0096955804 -0.0030018150 0.0166964024 0.0085735808 -0.0065652098 -0.0054567066 0.0387272798 -0.0328216487 0.0238425619 -0.0532948848 0.0864144728 -0.0607370452 0.1382261097 0.1908361532 -0.0819041054 -0.2090328512 -0.1103116947 0.0122748576 -0.0395948145 -0.0111558807 -0.0053411935 -0.0807411202 0.0820347177 0.0589222284 -0.0775396614 0.0746800032 0.0662070358 0.1076101040 -0.0246635146 -0.0153401620 0.0055990675 -0.0051466722 0.0029258697 -0.0088427479 0.0037702370 0.0001935095 0.0009494867 0.0024935987 -0.0009702801 -0.0067116011 -0.0029980289 0.0071305530 0.0014599472 -0.0037907097 -0.0012048338 -0.0018376851 0.0002425705 -0.0012224351 -0.0066691806 0.0003431911 -0.0118415720 -0.0006287441 -0.0016202697 -0.0006450492 0.0058124719 0.0088267435 0.0004217767 -0.0181425657 -0.0044320853 -0.0123501920 0.0062705969 -0.0017476846 0.0077550728 0.0033768312 0.0018284655 0.0012020363 0.0020616174 -0.0013750497 0.0035461409 -0.0003926617 0.0010389035 -0.0008982410 -0.0050826463 0.0014397500 -0.0038349247 -0.0350741348 0.0137640253 -0.0752014014 0.0919703246 -0.0589164132 0.1576944137 -0.0156536721 0.0072602427 -0.0268885842 0.0018072674 -0.0054267830 -0.0032303629 0.0003267284 -0.0064527920 0.0192866144 0.0190013092 0.0014209075 0.0198595093 -0.0067163061 0.0026811525 -0.0048072148 0.0014688473 0.0033904760 -0.0010789582 -0.0614406111 0.0129524050 -0.0892764793 -0.0671463755 0.0498042497 -0.1345154932 0.0225824774 -0.0113483665 0.0395623899 0.0054008262 -0.0058119812 -0.0088909607 0.0091081314 -0.0000658137 0.0207772420 -0.1468688823 0.1423252983 -0.1991897573 -0.0044285033 0.0099340721 -0.0065686209 0.0016260300 -0.0033579387 -0.0089496178 0.0013178272 0.0037364268 -0.0018458875 -0.0085763028 -0.0052380271 0.0107495949 -0.0045936172 -0.0062124444 -0.0026831256 0.0077923618 -0.0024447030 0.0067384248 0.0100261991 0.0007001350 0.0164398764 -0.0289629506 -0.0091659995 -0.0329255684 0.0110799917 -0.0137140877 0.0162226373 -0.0161894927 0.0090273433 -0.0518587637 0.0239592043 -0.0075251962 0.0330536036 0.0022391075 0.0017008240 0.0066147921 -0.0094212579 0.0082061952 -0.1402147665 0.0077177073 0.0018677671 0.0028862512 0.0070235440 -0.0176421915 -0.0119280627 0.0264437402 0.0192690362 -0.0011679781 0.0388505986 0.0176449974 0.0004412806 -0.0144315972 -0.0060342072 0.0016880239 0.0041111160 0.0017790202 -0.0013766774 0.0037316147 0.0020370377 -0.0004849051 0.0022560478 0.0011403322 -0.0019845498 -0.0263967441 -0.0302880219 -0.0061043408 -0.0130726321 0.0268345376 0.0210180609 -0.0042377877 -0.0083119182 0.0037191309 0.0075702855 -0.0151493736 0.0079578428 -0.0118145562 0.0076463864 -0.0032804194 -0.0060119676 -0.0046712786 -0.0094590488 0.0005337226 0.0058187507 -0.0160506554 -0.0088486815 0.0000196624 0.0036340097 -0.0045409320 -0.0032724223 0.0033820701 -0.0027114829 0.0079499625 0.0123960926 -0.0039542472 -0.0058079950 -0.0056515767 0.0292276787 -0.0103752039 -0.0148872782 0.0026764261 0.0949276205 0.0518582891 0.0279278149 -0.0045097767 -0.0175791401 -0.0023812165 -0.0004626732 -0.0021384819 0.0249860553 0.0441126189 -0.0665322815 -0.0176932014 -0.0438855878 0.0700462466 -0.0053881865 0.0058656704 -0.0013742986 0.0151202532 0.0282752772 -0.0596450906 -0.0124112778 -0.0370582576 0.0603976564 -0.1719579077 -0.3154380219 0.2588466607 0.0795028966 0.3753176118 -0.2320340923 0.0022320268 -0.0026821735 0.0008219262 -0.1549983310 -0.2606423298 0.1624564820 0.1133205587 0.3017096790 -0.2008743538 0.0015142183 -0.0038900660 -0.0004349626 -0.0093687896 0.0015683819 0.0066348478 0.0011177338 0.0027068954 0.0000021904 0.0051701185 -0.0120565009 -0.0070845431 -0.0066043290 0.0083852026 -0.0012321818 -0.0057365126 0.0182038208 -0.0073109858 0.0007555626 -0.0190904330 0.0138883231 0.0003364378 -0.0017602360 0.0007936629 -0.0182229105 0.0546210459 -0.0276620519 0.0232373648 -0.0490013118 0.0144459958 0.0005440667 -0.0017308406 -0.0036594575 0.0010016233 0.0012891337 0.0020521515 -0.0000544394 0.0002081390 -0.0002913541 -0.0003160558 0.0005204674 -0.0001331605 -0.0002708956 0.0009361188 -0.0004499429 -0.0076582320 -0.0044584104 0.0011541034 0.0011466285 0.0064278699 0.0000566215 -0.0019797701 -0.0013834144 -0.0024486046 0.0018388165 0.0001390200 -0.0161745416 0.0009740923 0.0068210367 0.0160320502 0.0009368132 0.0007277367 0.0006583416 0.0056662700 -0.0029312833 0.0011588201 0.0026517278 -0.0018528588 -0.0049113541 0.0057693105 -0.0039761468 -0.0057398078 -0.0070089789 0.0023675310 -0.0125785989 -0.0023153056 -0.0021349532 -0.0011224765 0.0014754623 0.0024341997 0.0002125468 0.0068484417 0.0080598382 0.0045385158 0.0039007002 0.0042866045 0.0031912554 0.0071991275 0.0077039314 0.0062112203 -0.0004984931 -0.0080827736 0.0048035476 -0.0003431349 -0.0013984327 0.0009234232 -0.0019788089 -0.0063035610 0.0087711742 -0.0007641850 -0.0063092994 0.0007406288 0.0262095084 -0.0200936740 0.0182646197 -0.0240869196 0.0670333911 -0.0445979317 0.0884769163 0.1226129957 -0.0591360345 -0.1420414765 -0.0802231804 0.0049662157 -0.0268911951 -0.0095450715 -0.0043685069 -0.0541790397 0.0598361767 0.0411486616 -0.0559729747 0.0552729179 0.0483671136 0.0835321994 -0.0181112274 -0.0142158073 -0.0015182909 0.0021889034 -0.0007221908 0.0060957764 -0.0004211020 -0.0000384641 0.0004037512 -0.0001377766 -0.0000452665 0.0036212570 0.0006938823 -0.0011235212 0.0003854148 -0.0003662761 0.0001078222 -0.0002179673 -0.0014667178 0.0005767060 0.0001235165 -0.0006244911 0.0024917274 -0.0002792610 0.0009082066 0.0008518455 -0.0002001845 -0.0023319446 -0.0007906256 0.0074765017 -0.0009409706 0.0009446637 -0.0019876238 0.0011394348 -0.0011702978 -0.0028141917 -0.0011025483 0.0004190487 0.0002627203 -0.0006751505 0.0003593253 0.0009354391 0.0007962995 -0.0003003928 -0.0003816826 0.0008292799 -0.0015318670 -0.0280125760 0.0104632950 -0.0813349462 -0.2563805339 0.1697837920 -0.4695879280 0.0506777453 -0.0303615022 0.0709657387 0.0061997516 -0.0066736668 0.0032147392 -0.0241854390 0.0154003032 -0.0335550413 -0.0437393679 0.0245541314 -0.0649244215 0.0138923278 -0.0074781945 0.0285907857 -0.0031169202 0.0005950859 -0.0045637698 0.1367720459 -0.0470890158 0.2451850060 0.2413057563 -0.1337532793 0.4359525151 -0.1224601564 0.0877169263 -0.1694289359 0.0066630580 -0.0049524862 -0.0075453496 0.0076263922 -0.0010757828 0.0204443894 -0.1540277341 0.1462501206 -0.2016753413 -0.0038004428 0.0089072290 -0.0072072159 0.0058827565 -0.0127936832 -0.0125084091 0.0108214978 0.0149526742 -0.0006608192 -0.0220381297 -0.0067220285 0.0138307847 -0.0003524326 -0.0032028823 -0.0001370717 0.0026070086 -0.0031622064 0.0049265296 0.0162420348 0.0123716800 -0.0039652724 -0.0380688164 -0.0224319972 -0.0196972020 0.0090100274 -0.0105761840 -0.0055440531 -0.0125697022 -0.0012426304 -0.0338430145 0.0285043264 -0.0179949124 0.0317528437 0.0012762448 0.0000068125 -0.0015110604 0.0022611346 0.0002460281 0.0274919352 -0.0025983995 0.0021102753 -0.0011422781 0.0031960192 -0.0153361522 -0.0125847833 0.0233006666 0.0179065267 -0.0007350108 0.0333684688 0.0144591004 0.0003888705 -0.0130066568 -0.0051923521 0.0014956293 0.0038721523 0.0016468076 -0.0012611323 0.0041817158 0.0016426523 -0.0007586531 0.0022823711 0.0009237121 -0.0016109946 -0.0233238719 -0.0276840476 -0.0060235770 -0.0117648869 0.0246020647 0.0192143560 -0.0040107271 -0.0077516070 0.0034927472 0.0074381068 -0.0147720462 0.0072910546 -0.0108227051 0.0068790367 -0.0031706866 -0.0071532556 -0.0057975934 -0.0045373075 0.0005318088 0.0073934318 -0.0135100830 -0.0092961594 0.0007602216 0.0028985145 -0.0038445284 -0.0033378995 0.0021678830 -0.0027962592 0.0081883779 0.0114881745 -0.0036651547 -0.0050204013 -0.0048815103 0.0263350645 -0.0094799272 -0.0138247261 0.0022584179 0.0853459214 0.0464925324 0.0252725339 -0.0038093028 -0.0157052731 -0.0022004371 0.0006339650 0.0002654981 0.0000995193 -0.0004097741 -0.0008486095 0.0016612187 0.0007907112 0.0023143278 -0.0007147560 0.0002146218 0.0000929387 0.0005213272 -0.0018885165 -0.0021594412 0.0004829008 0.0002697939 0.0007840975 -0.0027678690 -0.0015695589 -0.0005583900 0.0025651697 0.0027637389 0.0006481482 0.0001742732 0.0000183030 -0.0001520201 -0.0006488985 -0.0026108328 -0.0020921526 -0.0000126173 0.0014878863 0.0006387874 -0.0038348610 0.0066389923 -0.0028227222 0.0057326246 -0.0058558374 0.0001016523 0.0009115298 -0.0053081109 0.0005870892 -0.0120829877 0.0234024073 -0.0052020291 0.0123810868 -0.0194458416 0.0069260769 0.0146794625 -0.0397683941 0.0121485602 -0.0095331297 0.0410135952 -0.0053525201 -0.0022485006 0.0040236140 -0.0030398840 0.0528893097 -0.1409123827 0.0436582236 -0.0519249165 0.1168150516 -0.0240817108 -0.0000216100 -0.0000435219 -0.0000913631 0.0000941221 0.0000799146 0.0001642831 0.0013897099 -0.0007740890 -0.0007834898 -0.0008553391 -0.0007720059 0.0025641559 0.0008603392 -0.0004071051 0.0001413513 0.0038103066 0.0014548372 -0.0011423206 -0.0004454767 -0.0026810094 0.0008119883 -0.0000701627 -0.0004784553 0.0004576524 -0.0007458524 -0.0020643834 0.0027290697 0.0001173241 -0.0022861462 -0.0006914173 -0.0004554915 0.0006081447 -0.0002061890 -0.0027808598 0.0019975852 -0.0003599983 -0.0012747799 0.0009829689 0.0001007968 -0.0029414806 0.0021899440 0.0002834810 0.0010392762 -0.0007261106 0.0016632473 0.0005545090 0.0003423619 -0.0001266141 -0.0004161703 -0.0000217504 0.0001557559 -0.0008557428 -0.0009460587 -0.0007124634 0.0009720140 -0.0013443109 -0.0018185957 -0.0011978156 -0.0006635872 -0.0008640450 -0.0003702125 0.0015073601 -0.0004303715 0.0004119620 -0.0003207541 -0.0002449513 0.0023710192 -0.0004015958 -0.0031925327 -0.0025089906 0.0011293088 0.0015431318 0.0256801952 -0.0157565564 0.0275886439 0.0134071777 0.0999802889 -0.0596767738 0.0745876722 0.1074343759 -0.0741761098 -0.1535991607 -0.1032775167 -0.0035891378 -0.0228023066 -0.0125658524 -0.0075142389 -0.0537373496 0.0632388608 0.0430338624 -0.0516297029 0.0558536682 0.0501842133 0.0963416658 -0.0205931149 -0.0199040412 0.0013125309 -0.0019744861 0.0008502887 -0.0066243821 0.0001987011 0.0005097177 -0.0007310885 -0.0002230401 0.0001289182 -0.0031954158 -0.0002448122 0.0013094423 -0.0000237737 0.0005554446 -0.0004445962 0.0000168962 -0.0000177698 0.0008810276 -0.0006010092 0.0002530927 -0.0028341810 -0.0001901917 0.0000105923 -0.0005731476 0.0008811180 0.0012603565 -0.0001036120 -0.0034377931 -0.0002906799 -0.0024082173 0.0025850577 -0.0012652248 0.0013202505 0.0030582520 0.0018579596 0.0004220804 -0.0014887475 0.0002172477 -0.0006515745 -0.0007658312 -0.0007250675 0.0011490504 0.0006721650 0.0005737815 -0.0023017616 -0.0108301773 0.0063183824 -0.0089675094 -0.0053588697 0.0031445012 -0.0075575390 0.0004883285 0.0001411287 0.0017325651 -0.0001688721 0.0011529481 0.0002498928 0.0007830799 0.0006858478 -0.0018836425 -0.0017159819 -0.0013627735 -0.0006747111 0.0009358512 -0.0001232653 -0.0003981374 -0.0003208886 -0.0009708473 0.0003172375 0.0052669884 0.0019515035 0.0071977831 0.0012776576 -0.0031720777 0.0058665518 0.0005544284 -0.0006887809 -0.0012450277 -0.0004435596 0.0008897188 0.0025529214 -0.0015083705 -0.0007765832 -0.0041363540 0.0280473976 -0.0262104319 0.0221133418 -0.0005349668 0.0003721605 0.0070369545 -0.0240763152 0.0332968785 -0.0175838991 -0.0635520171 -0.0271813613 -0.0767355097 0.0693141929 -0.0011083983 0.0418939619 -0.0400257376 -0.0035426109 -0.0622340542 0.0590393693 -0.0100232861 0.0998156284 0.1422432611 -0.0971503910 0.4627418354 -0.0904902620 0.1060523628 -0.3051712849 0.1338650525 -0.0436252986 0.3890087831 -0.2229040010 0.1231253468 -0.5734352415 0.0555872903 0.0105000309 0.1645526511 -0.0001021001 -0.0005000714 -0.0020682647 0.0034800617 -0.0047233978 0.0544767644 0.0011324527 0.0003884960 0.0003959435 0.0027442655 0.0002167374 0.0007310115 0.0002507307 -0.0035954377 -0.0014301206 -0.0026823548 -0.0003472219 -0.0000712957 0.0016377118 0.0002483083 0.0007500879 -0.0006767878 0.0000566424 -0.0004591805 -0.0001417741 0.0000981171 -0.0006216175 -0.0005717122 -0.0000093535 -0.0002951857 0.0011787845 0.0015675831 0.0002926525 0.0003278323 -0.0007318452 -0.0002964087 0.0010456418 -0.0001119122 0.0002351559 -0.0018648655 0.0028226644 -0.0001842723 0.0007459910 -0.0001902383 -0.0000911285 0.0002251406 -0.0000688764 -0.0007792405 0.0015945944 -0.0028844261 0.0064131251 -0.0017370709 0.0034163968 -0.0027161118 0.0004213474 0.0010442591 0.0009378627 0.0006486977 -0.0021760642 -0.0017251757 0.0007462428 -0.0006605658 -0.0003488225 -0.0035935939 0.0008099125 0.0009132655 -0.0009423567 -0.0039063421 -0.0032397386 -0.0007095531 0.0037957847 0.0008220046 0.0025837786 -0.0006907608 -0.0004321577 -0.0016898918 -0.0008592300 0.0051587544 -0.0009142094 0.0011497465 -0.0072385341 0.0012469387 -0.0012671330 0.0004981363 -0.0007980011 0.0024549794 0.0054809536 -0.0007622514 0.0000556054 -0.0036459206 0.0086616213 0.0181553256 -0.0120136191 -0.0028709611 -0.0314541536 0.0100205568 0.0000382062 0.0005221125 -0.0011227483 0.0075247009 0.0109050995 0.0004911923 -0.0016238570 -0.0128965856 0.0025473326 -0.0000257532 -0.0000525144 -0.0001696633 -0.0010927416 -0.0001335233 0.0009698988 0.0001709617 -0.0000084934 0.0000658020 -0.0000650638 -0.0002209977 -0.0014082145 -0.0001228365 -0.0000742674 0.0002635472 -0.0000337770 -0.0000783271 -0.0000981449 -0.0003194558 -0.0010968100 0.0017225580 -0.0001187261 0.0000432149 -0.0000838434 0.0010093516 -0.0013323942 -0.0012231948 -0.0001396339 0.0007797796 0.0004342500 -0.0003988496 0.0004631530 0.0006657508 -0.0000780561 -0.0001411674 -0.0000954790 0.0001272712 -0.0000921056 -0.0001662068 -0.0000718768 0.0000554085 0.0002081941 -0.0008825455 0.0004253649 -0.0000881882 -0.0033719012 -0.0013338933 0.0008966923 0.0004180318 0.0024353294 -0.0006732991 0.0002209069 0.0004184333 -0.0005566244 0.0004784471 0.0017388547 -0.0027990243 0.0001729060 0.0023685471 0.0012241270 0.0003520540 -0.0005712085 0.0002206963 0.0024699410 -0.0018129246 0.0004109448 0.0010213294 -0.0008701156 0.0000249574 0.0023877471 -0.0023618686 -0.0005193129 -0.0015193422 0.0007542078 -0.0024912307 -0.0004567388 -0.0003020926 -0.0002676313 0.0002218620 -0.0000888770 0.0001423466 0.0015158478 0.0017160514 0.0008490786 0.0001197294 0.0004380198 0.0008908640 0.0008817746 0.0023569850 0.0009975956 0.0000680599 -0.0021460137 0.0011116685 -0.0003213754 0.0000138295 0.0001766909 -0.0013842771 -0.0009578132 0.0030813205 0.0014932521 -0.0011215963 -0.0008952021 -0.0009808119 -0.0002846380 -0.0051268690 -0.0189397878 -0.0174033210 0.0091325188 0.0016027122 0.0001625375 0.0098805689 0.0028036955 0.0162930818 0.0063135517 -0.0009234516 0.0052849421 -0.0002951237 -0.0115645957 -0.0041090611 0.0037437548 0.0148677873 -0.0117027092 -0.0045349507 -0.0166440683 -0.0002550220 0.0105049555 -0.0017020102 0.0026321736 -0.0010603469 0.0084663977 -0.0002264320 -0.0010936541 0.0008822556 0.0004683921 -0.0001774315 0.0044208492 0.0005102452 -0.0020489015 -0.0007961421 -0.0013240625 0.0008579043 0.0000114020 0.0002552103 -0.0015060420 0.0010619326 -0.0003157921 0.0043176800 0.0003039801 -0.0001494392 0.0009516590 -0.0015141045 -0.0018643496 0.0002539408 0.0054319636 0.0004285359 0.0040131877 -0.0049819339 0.0025793022 -0.0023235937 -0.0042149851 -0.0023017697 -0.0007226594 0.0036280775 -0.0013274278 0.0020241164 0.0010046424 0.0018083162 -0.0019413001 -0.0011583087 -0.0005909505 0.0041046906 0.0034287628 0.0012006533 0.0573389612 0.0280448615 -0.0172685795 0.0416167686 -0.0016323945 0.0008563766 -0.0089651233 -0.0005428558 -0.0002623152 -0.0032528074 0.0010267682 -0.0047131071 0.0043630307 0.0055810317 0.0007601277 0.0064259008 -0.0050969334 -0.0009310002 -0.0019566393 0.0011197153 0.0051708794 0.0012357569 -0.0191058188 -0.0054460621 -0.0344747430 -0.0222324502 0.0164457221 -0.0437066474 0.0137120251 -0.0150127810 0.0250526270 -0.0040495723 -0.0022639277 0.0063395533 -0.0002612398 0.0108579788 -0.0182763701 0.0673518624 -0.0574817719 0.1863869537 0.0147748041 -0.0266435917 -0.0094419851 0.0982406629 -0.2185669706 -0.1066721557 0.1664026643 0.2665523251 -0.0750855655 -0.2829925327 -0.0395989302 0.1464016605 0.0467974983 0.0630978117 -0.0269890633 -0.0546131159 -0.0249083645 0.0805364302 0.3618478901 0.1855992318 0.1063756943 -0.3638480652 -0.1580236957 -0.0132392288 0.1473789123 0.0000366701 0.0097441929 -0.1883720105 -0.0822665387 -0.2724490782 0.1808527656 -0.2523023057 0.0772835873 -0.0012470475 -0.0005162642 0.0052831778 -0.0073024930 0.0153533190 -0.1470160370 -0.0016422004 -0.0010385164 -0.0005314027 0.0044008421 0.0029961906 0.0080869496 -0.0033570633 -0.0132743621 -0.0062984994 -0.0083445073 -0.0022470594 0.0005810032 0.0042358941 0.0023492750 0.0004390150 -0.0014832989 -0.0009062945 -0.0007296604 0.0010492749 -0.0018727804 0.0015326504 -0.0012479670 -0.0006897177 0.0000119908 0.0053901334 0.0064675375 0.0035408332 0.0032498101 -0.0052395804 -0.0048946524 0.0044984381 -0.0000377968 -0.0000500109 -0.0044786486 0.0072183882 -0.0011271897 0.0023446304 0.0012233172 0.0024186350 0.0019312528 -0.0001225751 0.0034551755 0.0040621591 -0.0106133736 0.0042671147 -0.0030492045 0.0155908793 -0.0112714077 0.0016442207 0.0016672880 -0.0004533589 0.0011590130 -0.0044130636 -0.0058289801 0.0014849236 0.0005542554 0.0008956785 -0.0100710784 0.0092751027 0.0098113420 -0.0012776741 -0.0239524809 -0.0133651718 -0.0091875323 0.0119060596 0.0068688187 -0.0027303851 0.0015603122 0.0001875773 -0.0004446433 -0.0036361265 -0.0003623738 0.0026771615 0.0030171542 0.0011775468 -0.0016753405 0.0000233861 0.0005861143 0.0007134311 -0.0030403682 -0.0032150202 0.0011615602 0.0010066986 0.0012544736 0.0102035966 0.0077865249 -0.0092282572 -0.0070720380 0.0004063139 0.0133245042 -0.0005098115 0.0000669915 -0.0010932482 0.0007312084 -0.0029984669 -0.0035645069 -0.0016264192 0.0012343309 0.0037545568 -0.0000398480 0.0003976090 0.0005228562 0.0017606680 0.0000948171 -0.0014587361 -0.0007994342 0.0003761885 -0.0002382435 0.0011787896 -0.0016201084 0.0028001035 -0.0006137629 0.0015874756 -0.0012244331 0.0006487940 -0.0010884681 0.0008858191 0.0007110515 0.0011751108 -0.0025991657 0.0003113489 -0.0002819304 0.0004171722 -0.0056746037 0.0153438108 -0.0021242249 0.0041941678 -0.0099385857 0.0007702302 0.0001900698 0.0012541908 0.0015347128 0.0004020921 -0.0004540600 -0.0006646606 -0.0000770510 -0.0001262284 -0.0000491425 0.0001871592 0.0000788336 -0.0001871244 0.0012376479 -0.0004408046 -0.0000272182 0.0049632180 0.0020186671 -0.0013418139 -0.0006006977 -0.0037284965 0.0012551926 -0.0002769121 -0.0006469685 0.0006964566 -0.0006610963 -0.0031607115 0.0032575584 -0.0001671775 -0.0031355854 -0.0012910835 -0.0003655922 0.0005640918 0.0000018258 -0.0036628649 0.0027664960 -0.0007998927 -0.0014697198 0.0003868575 -0.0013024512 -0.0029804297 0.0044742598 0.0012254527 0.0024661795 -0.0011788826 0.0041605209 0.0007404633 0.0004151960 0.0005278697 -0.0001518209 0.0000639244 -0.0002360653 -0.0026716125 -0.0028838448 -0.0012215632 -0.0008526108 -0.0002247654 -0.0005897470 -0.0004685141 -0.0047481820 -0.0018371486 -0.0000697267 0.0035738356 -0.0017865134 0.0004980215 0.0000815843 -0.0004677672 0.0027771747 0.0017370661 -0.0046725166 -0.0024919553 0.0021907370 0.0013273984 -0.0153332356 0.0059775355 -0.0257335030 -0.0425534359 -0.0922485829 0.0510724390 -0.0315951412 -0.0495851839 0.0613994985 0.1111097555 0.0922573631 0.0140517255 0.0040721220 0.0124799026 0.0042984042 0.0076872593 -0.0270321529 -0.0131827096 0.0331363749 -0.0319928169 -0.0216939545 -0.0595796016 0.0099977635 0.0207041470 -0.0146099723 0.0212294061 -0.0078415705 0.0660186446 -0.0017748897 -0.0030468469 0.0058964219 0.0016374847 -0.0015313018 0.0338960188 0.0075757416 -0.0204474052 -0.0101767420 -0.0064142836 0.0066626370 0.0001333114 0.0031108943 -0.0122259561 0.0138720488 -0.0026733120 0.0393032323 0.0029156741 -0.0000071213 0.0081192449 -0.0146706146 -0.0211731577 0.0012936235 0.0535313112 0.0068969644 0.0404285426 -0.0389566358 0.0182049546 -0.0212843126 -0.0301412862 -0.0191670274 -0.0069076278 0.0192941687 -0.0053807008 0.0075770802 0.0139699920 0.0140794850 -0.0208192709 -0.0067860450 -0.0108633939 0.0429695222 -0.0513072117 0.0235790943 -0.0130346058 0.0450841300 -0.0263406013 0.0652487275 -0.0036145867 -0.0003827718 -0.0144643138 -0.0011919287 -0.0082186349 -0.0052995212 -0.0080171052 -0.0144881985 0.0196096337 0.0195649493 0.0196337851 0.0054760599 -0.0146806578 -0.0047737782 0.0032011013 0.0019695682 0.0138805877 -0.0028143952 -0.0620053786 -0.0568537497 -0.1016046943 0.0014275684 0.0330331832 -0.0599363979 -0.0019859843 -0.0389873615 0.0097603858 0.0060536247 -0.0098930666 -0.0075859099 0.0087176893 0.0056869834 0.0044438878 -0.0510583095 0.0599424189 -0.0660457579 -0.0002526889 0.0060248840 -0.0009267765 -0.0030753739 0.0086222303 -0.0029499515 -0.0103604250 -0.0114710146 -0.0002174936 0.0079649712 -0.0002845295 0.0007296965 -0.0054139780 -0.0083694529 0.0003427424 0.0070471074 0.0003878220 0.0037205547 -0.0070948951 -0.0122222863 0.0183352169 -0.0041642192 0.0166451980 -0.0253705780 -0.0013392254 -0.0104175367 0.0052911557 -0.0075239552 0.0188025362 -0.0299510482 0.0170125867 0.0094343216 0.0234787234 -0.0004223611 0.0037726934 0.0339032189 -0.0480554468 0.0832130211 -0.8612910960 -0.0196321748 -0.0082549999 -0.0063228786 -0.0053430166 -0.0097847691 -0.0024461740 0.0122590966 0.0033754133 -0.0035886380 0.0106128182 0.0042404809 0.0004145228 -0.0075074906 -0.0017724535 0.0028246922 0.0039115295 -0.0007822513 -0.0022904078 0.0038147534 0.0016261101 -0.0008293392 0.0026368939 0.0008277845 -0.0023475617 -0.0097674620 -0.0136390461 -0.0039465213 -0.0049757047 0.0141927805 0.0102907518 0.0022251806 -0.0098697034 0.0020071173 0.0028734108 -0.0070108976 0.0082453764 -0.0161803116 0.0209966894 0.0056092869 -0.0073374712 -0.0034499909 0.0156942790 -0.0006631105 0.0015634020 -0.0336178361 0.0005130004 -0.0036636517 0.0026544733 -0.0043747239 -0.0047967038 0.0006983780 -0.0012485807 0.0059910685 0.0089777372 -0.0041935741 -0.0086751796 -0.0076978081 0.0090623993 0.0014854534 -0.0021242011 -0.0000843732 0.0363030005 0.0200228941 0.0086856291 0.0039838266 -0.0026111111 -0.0179946234 0.0082552656 0.0020674567 -0.0085456970 -0.0204756630 0.0213495289 0.0184810761 0.0254711843 -0.0112959584 -0.0018650900 -0.0029460100 0.0033763111 0.0038878902 -0.0173454238 -0.0049146284 0.0017946124 0.0044443594 -0.0118876209 0.0992859959 0.1232396011 -0.0978425485 -0.0445249242 -0.1171495713 0.1259034950 0.0002159421 0.0032941091 -0.0012157620 0.0365000698 0.0157635642 -0.0272288068 -0.0170620143 -0.0523217557 0.0278822031 -0.0011979225 0.0022451015 0.0052779029 0.0201952656 0.0020527746 -0.0180421415 -0.0049866595 -0.0013304703 -0.0017076904 0.0007148052 0.0043636405 0.0251751357 0.0039920190 0.0013284542 -0.0070936862 -0.0047118758 -0.0083594967 0.0080617851 0.0133178699 0.0154501897 -0.0245385666 0.0018555109 0.0000093087 0.0011991040 -0.0182137526 0.0192847249 0.0233114056 0.0032849000 -0.0117145072 -0.0108968543 -0.0002887313 -0.0003896216 0.0007353315 -0.0008408777 -0.0006961253 -0.0004075029 -0.0012708293 0.0007777803 0.0017544694 0.0010749267 -0.0005330474 -0.0022246754 0.0088773660 -0.0032479416 0.0001598815 0.0393700410 0.0178233895 -0.0103475412 -0.0052190466 -0.0314542754 0.0081927526 -0.0001364262 -0.0022648882 0.0075002409 -0.0061481068 -0.0209233002 0.0388345589 -0.0041261923 -0.0259644776 -0.0282636767 -0.0023891678 0.0022839086 0.0017244810 -0.0292376551 0.0202449623 -0.0085960669 -0.0155093942 -0.0012631342 -0.0145272757 -0.0202351502 0.0405806386 0.0241162226 0.0231372884 -0.0100176905 0.0410215508 0.0079239563 0.0046783302 0.0057577408 -0.0006099016 -0.0025925012 -0.0024281136 -0.0264508879 -0.0270765363 -0.0111139631 -0.0188118190 -0.0014595492 -0.0018001999 -0.0003820671 -0.0469948829 -0.0208465250 -0.0002938051 0.0323933850 -0.0167382797 0.0041854336 0.0018967083 -0.0060668135 0.0225696968 0.0176695051 -0.0404106678 -0.0227827790 0.0252907429 0.0109693805 0.0103549009 0.0082093023 0.0253345808 0.0861720592 0.0954371877 -0.0462202532 -0.0028381822 0.0023845513 -0.0545512821 -0.0650921058 -0.0806930058 -0.0257763727 -0.0114436770 -0.0129570976 -0.0163380487 -0.0609076024 0.0669530480 0.0491678807 -0.0115744092 0.0394269759 0.0498251834 0.1237382450 -0.0346748936 -0.0155544763 0.0049159657 -0.0066688496 0.0015264447 -0.0148374494 0.0017761395 0.0009461363 0.0002699378 0.0008351914 0.0002716081 -0.0053410537 0.0044732316 -0.0075646686 -0.0064606774 0.0021562780 0.0017746661 0.0056680147 0.0041978227 0.0007455149 0.0069008097 0.0089689728 0.0093806690 0.0068152271 -0.0021502975 -0.0027631974 -0.0107713593 -0.0109848684 0.0012140525 0.0039913826 0.0193938696 0.0321620868 -0.0108287621 0.0032709251 -0.0096012630 0.0052156162 0.0005990391 -0.0018137463 0.0020827236 -0.0010526227 0.0012961137 0.0017797448 0.0010970138 -0.0029257653 -0.0001369691 -0.0018053451 0.0041308954 -0.0186725395 0.0085631022 -0.0252533593 0.0009271640 0.0031422123 -0.0074857480 0.0017728040 -0.0014597805 -0.0004439573 0.0010484720 -0.0019038192 -0.0002425371 -0.0018798844 -0.0005248991 0.0020713532 0.0001757959 0.0026082901 -0.0023705548 -0.0009600880 -0.0006155082 0.0033220084 0.0000278799 0.0015076541 -0.0009515537 -0.0041391803 -0.0033636118 -0.0034825531 0.0109935339 -0.0030909487 0.0115774388 -0.0115641526 0.0113551146 -0.0101983342 0.0017762644 -0.0020389392 -0.0019092680 0.0024059188 -0.0010535691 0.0075934615 -0.0623430922 0.0584014527 -0.0844978937 -0.0019481163 0.0045525547 -0.0025671837 -0.0012988889 0.0030166404 -0.0015948743 -0.0017428465 -0.0041303720 0.0026241862 0.0011203261 -0.0006910302 -0.0005840079 -0.0012831819 -0.0040208550 0.0023545273 0.0027272113 -0.0000214261 -0.0011122245 -0.0056378012 -0.0030643874 -0.0064256109 0.0000591035 -0.0006781897 -0.0027899755 -0.0047384532 -0.0040191030 -0.0114793071 0.0022109112 0.0039446176 -0.0020267731 0.0066718465 0.0022869295 0.0117626457 -0.0000654792 0.0002192185 0.0037123563 -0.0046341940 0.0087680106 -0.0898102902 -0.0136550220 -0.0092728017 -0.0046861946 0.0140117225 -0.0000327406 -0.0030911476 0.0025541716 0.0120523782 0.0060233532 0.0136962489 0.0063619177 -0.0012770818 -0.0051013211 -0.0011285955 0.0014977467 0.0023720983 -0.0008724615 -0.0011021461 0.0013776009 0.0000729771 -0.0009721218 0.0006165963 0.0001148619 -0.0010796823 -0.0032512566 -0.0028884797 0.0004350785 -0.0028865268 -0.0014423857 0.0004587017 0.0020262795 -0.0059467746 0.0018657993 0.0003200920 -0.0008528361 0.0048643588 -0.0073114738 0.0097473888 0.0027975355 -0.0013685708 -0.0010434500 0.0026226028 -0.0005650123 0.0045208735 -0.0055541760 -0.0020066427 0.0017684634 -0.0019098880 -0.0014653007 -0.0012232156 0.0008384038 -0.0007172522 0.0016804148 0.0031503708 -0.0012480729 -0.0031272240 -0.0026926561 0.0103762362 -0.0121466108 -0.0094770388 0.0021392162 0.0184672778 0.0099891863 0.0096638434 -0.0111082820 -0.0113387402 0.0073287405 -0.0035958759 0.0002967022 0.0012263050 0.0059178849 0.0044926084 -0.0081905641 -0.0072590613 -0.0091621908 0.0025218497 -0.0004918559 -0.0005953997 -0.0008673704 0.0092525203 0.0105979528 -0.0031913186 -0.0032701059 -0.0057429285 0.0095374764 -0.0016952130 0.0157618180 0.0030302943 -0.0060314729 -0.0227199243 -0.0009572546 0.0001143689 0.0003556174 0.0129393816 0.0099445241 0.0159195874 0.0042108919 -0.0111667511 -0.0095535813 -0.0049729394 0.0054922629 0.0201315505 0.0219990370 0.0012766991 -0.0279067520 -0.0063658260 -0.0029925968 -0.0021023078 -0.0045343478 0.0058898559 0.0344804836 0.0107830089 0.0016868461 -0.0194039315 -0.0293443209 -0.0142621031 0.0287130569 -0.0035644427 -0.0143809496 -0.0648992502 0.0022511881 0.0008412659 0.0011518090 -0.0484707375 -0.0015716984 0.0427575339 -0.0033753634 -0.0228717370 -0.0425998899 0.0004047106 0.0008521403 0.0013474377 -0.0004139694 -0.0007459162 -0.0014813632 -0.0015721550 0.0012528784 0.0028751926 0.0022262155 -0.0009156648 -0.0030951286 -0.0020463712 0.0015415233 -0.0014878597 -0.0041322849 0.0021128294 0.0028944316 0.0000926972 0.0003393380 0.0055626249 0.0010720914 0.0005085057 -0.0087440385 -0.0093674716 -0.0121185479 -0.0262853271 0.0052263205 0.0260658827 0.0359563331 -0.0002423401 -0.0080058597 -0.0034564274 0.0032040173 0.0013719732 0.0079707561 0.0102719647 0.0062181556 0.0373106192 -0.0039989413 -0.0153908419 -0.0446308149 0.0142189931 -0.0011458263 0.0097764953 0.0002378276 0.0050311891 0.0080953591 -0.0539917846 0.0133890695 0.0393007250 0.0629653149 -0.0531389470 -0.0529836766 0.3287709699 -0.1516004908 -0.1563679500 -0.4328190168 0.1842871203 0.2613332329 0.0434510436 -0.0133517933 -0.0298525760 -0.0687588311 0.0448051956 0.0284185077 -0.2180322506 0.1451293732 0.1704384374 0.3711683768 -0.1507087629 -0.2503541532 -0.0008287402 -0.0251704433 -0.0376480559 -0.1694531058 -0.1351137377 0.0585051701 0.0622695006 0.0714895953 0.0673216553 0.0484413743 0.1089564693 0.0511631109 -0.0020604414 0.0094519426 0.0370804789 0.1247469654 -0.0827799523 -0.0878676659 -0.0691439695 -0.0020869807 -0.0539056235 -0.1623883424 0.0670861404 -0.0051426644 -0.0013247873 0.0012415298 -0.0004114510 0.0016347796 -0.0023576525 -0.0025319993 -0.0004424368 -0.0007583234 0.0011310883 0.0018749353 -0.0014849118 0.0024202534 0.0048346123 0.0001216744 -0.0009691251 -0.0009709704 -0.0041029107 0.0013007334 -0.0067712766 -0.0006520234 -0.0029620893 0.0018440122 -0.0004581482 -0.0042914730 0.0010495499 0.0041332812 0.0002021876 -0.0178192757 0.0045241569 -0.0042466724 0.0066253663 -0.0022734584 0.0041251794 -0.0014331360 0.0006085859 0.0013335544 -0.0016640387 0.0011303042 -0.0010809857 -0.0034647153 -0.0026985927 0.0044971771 0.0008997901 0.0021595177 -0.0068451334 0.0349475433 -0.0160213559 0.0520714290 0.0021055327 -0.0069739986 0.0175221525 -0.0033249651 0.0025742457 -0.0002306496 -0.0022352996 0.0033525016 0.0001058221 0.0034029439 0.0002209801 -0.0029504750 0.0003917444 -0.0040608015 0.0047934791 0.0006428777 0.0010506854 -0.0061464762 0.0002010418 -0.0016779632 0.0017763592 0.0042566330 0.0034189551 0.0000398139 -0.0215072813 0.0075191124 -0.0239149867 0.0226584275 -0.0246843321 0.0215335574 -0.0032684060 0.0033922660 0.0033925409 -0.0042863007 0.0026543225 -0.0155536874 0.1261071154 -0.1171939635 0.1720452462 0.0041328903 -0.0091507795 0.0052116974 0.0028795367 -0.0063713819 0.0029191580 0.0035798641 0.0086089780 -0.0054437313 -0.0029165590 0.0012938017 0.0015567212 0.0025744179 0.0079732993 -0.0047852364 -0.0056362573 0.0000099371 0.0024985217 0.0118351133 0.0063066831 0.0134380400 -0.0010980003 0.0022804304 0.0053807065 0.0104462336 0.0073806583 0.0228665945 -0.0050007357 -0.0076468957 0.0033611982 -0.0123541143 -0.0047062369 -0.0234315818 -0.0003623581 -0.0003957031 -0.0049707993 0.0064966636 -0.0109232552 0.1156975704 0.0050608351 0.0033707094 0.0025541726 -0.0295653673 -0.0008176532 0.0057853632 -0.0037947762 -0.0249913507 -0.0130659787 -0.0272708232 -0.0126024046 0.0026825613 0.0099134129 0.0020095485 -0.0027473458 -0.0044456134 0.0015703342 0.0020507512 -0.0026856291 0.0000249678 0.0020514458 -0.0010861795 0.0000050540 0.0019354944 0.0056710278 0.0042658462 -0.0014733284 0.0054284670 0.0048588716 0.0003626532 -0.0041664563 0.0119064712 -0.0042622977 -0.0007428857 0.0021730928 -0.0095237870 0.0123867143 -0.0172685153 -0.0050508889 0.0032063134 0.0025262047 -0.0055096548 0.0007681924 -0.0085408872 0.0081478753 0.0042095676 -0.0036456518 0.0039979620 0.0025480203 0.0023779600 -0.0010823587 0.0014860250 -0.0031291362 -0.0056093488 0.0021936453 0.0049941825 0.0044438240 -0.0206026850 0.0257451695 0.0196963329 -0.0045029425 -0.0342213192 -0.0184046825 -0.0191700542 0.0237740517 0.0234738063 -0.0020515206 0.0009777923 -0.0002705424 -0.0001409579 -0.0015271749 -0.0031647945 0.0027426354 0.0020553053 0.0047544491 -0.0008201343 0.0002844569 0.0000457041 -0.0001078676 -0.0031901475 -0.0044639480 0.0013767266 0.0013919419 0.0032349106 -0.0113769304 -0.0059745426 -0.0022585864 0.0008817793 0.0084878819 0.0039860615 0.0004631368 -0.0003405797 -0.0001786764 -0.0089460821 -0.0048554550 -0.0063888766 -0.0014139030 0.0079917196 0.0033036734 0.0032172834 -0.0031473239 -0.0183112597 -0.0110943285 -0.0012832044 0.0193994498 0.0038470037 0.0023751313 0.0012419524 0.0042388485 -0.0034610109 -0.0228509346 -0.0084608014 -0.0008861624 0.0156933942 0.0257479164 -0.0005322041 -0.0213400629 0.0108723499 0.0320713798 0.0559396922 -0.0013420193 -0.0005396698 -0.0009367539 0.0391012725 0.0055372235 -0.0301902926 0.0053874972 0.0189773061 0.0375918282 -0.0002948264 -0.0004672554 -0.0008676561 0.0003289735 0.0005312188 0.0010164701 0.0008832520 -0.0007379779 -0.0016544023 -0.0016579304 0.0004609572 0.0018897596 0.0006080081 -0.0003185390 -0.0005242645 0.0013631169 -0.0005180644 -0.0000107913 0.0013869397 0.0020545468 0.0050793288 -0.0028464638 -0.0053808832 -0.0068006341 0.0005118777 -0.0124890023 -0.0307877312 0.0083683394 0.0096948698 0.0468936556 -0.0009663248 0.0007406715 -0.0065293237 -0.0001346850 0.0048891669 0.0083557189 0.0120414840 0.0155398267 0.0335828460 -0.0113310014 -0.0171522409 -0.0495587660 -0.0002788000 -0.0004065338 -0.0088034884 -0.0037188370 -0.0002243410 0.0008423718 -0.0257908986 0.0126324953 0.0181902266 0.0391468137 -0.0160674372 -0.0225181421 0.1700180448 -0.0703729893 -0.0812903236 -0.2085175675 0.1051527548 0.1326432520 0.0204261653 -0.0140158834 -0.0105119745 -0.0326539566 0.0178545692 0.0192904860 -0.1124303104 0.0629384900 0.0858977982 0.1803275045 -0.0893090872 -0.1174978467 0.0026115130 0.0528878635 0.0803443400 0.3589075785 0.2885908794 -0.1254032187 -0.1294062556 -0.1480429176 -0.1445801112 -0.1061437249 -0.2331154532 -0.1083780685 0.0031350724 -0.0205239226 -0.0781240073 -0.2641014577 0.1775696498 0.1866800608 0.1415657042 0.0080577413 0.1156979950 0.3470403176 -0.1421791477 0.0098954150 -0.0344002979 0.0458084972 -0.0144730443 0.1226867401 -0.0165856686 -0.0245654160 0.0051234136 -0.0003851701 0.0033694901 0.0557714342 -0.0205331283 0.0170335598 0.0291033163 -0.0220909094 0.0007427312 -0.0233832343 -0.0245056901 -0.0164512024 -0.0483185676 -0.0301364775 -0.0088181619 -0.0024005392 -0.0020353336 -0.0041635978 0.0283646887 0.0424201556 0.0010736363 -0.0767658651 -0.0224439038 -0.0693639468 0.0281438166 -0.0043815084 0.0357849994 -0.0514597270 -0.0171028262 0.0047067047 0.0008914032 0.0016916177 -0.0009781716 0.0039023717 0.0062134007 -0.0014289638 -0.0036895979 0.0018794130 0.0072651160 -0.0161096538 0.0077625289 -0.0217865212 -0.0040212763 -0.0017514191 0.0003739293 -0.0003110436 0.0000573519 0.0004454605 0.0007476453 -0.0015929299 -0.0002460479 -0.0020232173 -0.0016620684 0.0019970691 0.0025421967 0.0031648070 -0.0006503257 -0.0000781489 -0.0013072603 0.0010786789 -0.0001204789 0.0007503608 -0.0008580690 -0.0048595309 -0.0079927986 -0.0059421727 0.0074653318 0.0014490249 -0.0035611456 -0.0060098454 0.0010718372 -0.0085063182 0.0014587506 -0.0010667547 -0.0013340905 0.0019543865 -0.0012437563 0.0063746612 -0.0507755362 0.0474257774 -0.0725026586 -0.0018381609 0.0040161191 -0.0020339879 -0.0023893986 0.0040836253 -0.0021091850 -0.0032022463 -0.0052556513 0.0017789563 0.0037411725 -0.0001341329 -0.0011344749 -0.0014324878 -0.0037976261 0.0025816509 0.0036908215 0.0001142281 0.0001126484 -0.0051800285 -0.0047002443 -0.0006629682 0.0012553304 -0.0008087142 -0.0066360815 -0.0091356256 -0.0011819911 -0.0103572787 -0.0003381429 0.0066750000 -0.0091117342 0.0076640649 0.0022806159 0.0174510935 0.0006482244 0.0007690139 0.0031740095 -0.0052355527 0.0053555597 -0.0753310041 0.0485337140 0.0318443837 0.0171373756 0.0106841673 0.0003075025 -0.0003264646 0.0000411251 0.0098212857 0.0055054274 0.0089802793 0.0037004974 -0.0010341178 -0.0039973007 0.0000053142 0.0010112180 0.0019235512 -0.0007823023 -0.0007557769 0.0018527584 -0.0000273019 -0.0015069684 0.0008180515 -0.0004903541 -0.0005288598 -0.0011138384 0.0004466169 0.0013114488 -0.0015255936 -0.0040758977 -0.0016124043 0.0026979567 -0.0059724223 0.0026512389 0.0011628953 -0.0025436189 0.0037244449 -0.0045705255 0.0062605916 0.0018207465 -0.0057489763 -0.0036142458 0.0097210569 0.0014259876 -0.0001746511 -0.0025021891 -0.0015518371 -0.0004016417 -0.0006080874 -0.0012445912 -0.0025663656 -0.0017598015 -0.0008189783 0.0020104711 0.0018737808 -0.0016014127 -0.0005655499 -0.0010216080 0.0069321148 -0.0106531411 -0.0076627843 0.0017844978 0.0090043163 0.0045755466 0.0064277106 -0.0096601987 -0.0090389347 -0.0570375791 0.0292308915 -0.0028018880 -0.0182041905 -0.0718150823 -0.0343111142 0.0716371628 0.0776071763 0.0677734678 -0.0250667594 0.0035757566 0.0070944502 0.0034410592 -0.0821533309 -0.0901405892 0.0323768688 0.0364409606 0.0532278854 -0.0225393600 0.0945280487 -0.2202474708 -0.0838892197 0.0022202725 0.2788492401 0.0084464607 0.0016247133 -0.0032083980 -0.1250056531 -0.0731747910 -0.1542781071 -0.0490701104 0.0945258560 0.1084436056 0.0237018248 -0.0210888028 -0.0827903593 -0.0828090672 -0.0008275402 0.1066735213 0.0265114367 0.0123655018 0.0103801364 0.0185636231 -0.0225959750 -0.1305290157 -0.0445726245 -0.0051672693 0.0773742141 0.1347546739 0.0739123662 -0.1238296836 0.0176373248 0.0311755386 0.2433524002 -0.0098826840 -0.0040468489 -0.0040861003 0.1902312349 0.0120579157 -0.1643898095 0.0176822817 0.0837372918 0.1742816478 -0.0021537573 -0.0069334893 -0.0095022760 0.0030947044 0.0046710339 0.0101798107 0.0062071092 -0.0058376964 -0.0130501194 -0.0084631180 0.0040027201 0.0124595970 0.0222864823 -0.0081622322 -0.0008377646 0.0581958391 0.0063974419 -0.0142290493 0.0072254817 -0.0169896935 0.0333205391 -0.0324392588 -0.0524727896 -0.0217145953 0.0411371819 -0.0893298100 -0.1356324255 0.0461764127 -0.0263080282 0.2627337958 -0.0071489231 0.0269158225 -0.0502239372 -0.0373115819 0.0619738458 0.0417260148 0.0866487201 0.1216952636 0.1953841349 -0.0964681525 -0.0501868520 -0.2959271662 -0.0206555065 -0.0089593643 -0.0420211027 -0.0146218356 -0.0117235170 -0.0091865526 -0.0037621439 0.0382694564 -0.0035966698 0.0355687086 0.0248380675 0.0026231651 0.0859041785 0.0017724373 -0.0545567693 -0.0489611984 0.0695388537 0.0591985295 0.0026776672 -0.0157011332 0.0013552816 -0.0035848841 -0.0153508810 0.0305873637 -0.0573424785 -0.0031096721 0.0063113022 0.0339262137 -0.1022661458 -0.0055041193 -0.0014495850 -0.0184094130 -0.0300569933 -0.1293128515 -0.1068559474 0.0469143197 0.0449689220 0.0506173788 0.0550142072 0.0435304774 0.0880135066 0.0394155960 -0.0004813815 0.0065349478 0.0281231893 0.0990595028 -0.0650770412 -0.0698207343 -0.0496454066 -0.0034090115 -0.0408038043 -0.1249505521 0.0528808243 -0.0068311092 0.0016912346 -0.0056241051 -0.0002491803 -0.0228497174 -0.0025291583 -0.0045032007 -0.0014737508 -0.0000366747 0.0044953667 -0.0128939020 -0.0036604526 -0.0085049941 -0.0051195508 0.0053648888 0.0011394602 0.0063261282 0.0089768696 0.0027412870 0.0107959882 0.0067069809 0.0011548905 0.0000462895 -0.0008077916 0.0028326009 -0.0025756482 -0.0056418141 -0.0002928289 0.0144050345 0.0010308468 0.0120890441 -0.0061248105 0.0005594750 -0.0072412262 0.0096143467 0.0030514345 -0.0010180981 0.0003531283 -0.0003949943 0.0005600444 -0.0009508022 -0.0013249731 0.0003840349 0.0005984752 -0.0002750692 -0.0015803069 0.0022350221 -0.0011180177 0.0037911341 0.0028658712 0.0003836120 0.0008445760 0.0001889184 -0.0001173440 -0.0005759812 -0.0001482250 0.0002142853 -0.0000276008 0.0004287197 0.0001980858 -0.0000385958 -0.0004719826 -0.0004871611 0.0000981912 -0.0003264680 0.0002936753 0.0000674626 0.0000759760 0.0001727924 0.0001323220 -0.0003020110 0.0012461564 -0.0010221058 -0.0016404090 -0.0001099136 0.0009938458 0.0006533466 0.0002757333 0.0018381016 -0.0001843957 0.0000313906 0.0001389934 -0.0002399260 0.0002941636 -0.0011170765 0.0084973244 -0.0077973680 0.0124731668 0.0003380069 -0.0006559920 0.0003518224 0.0003654347 -0.0005824703 0.0003746237 0.0004145849 0.0007199211 -0.0003042904 -0.0005114372 0.0000333918 0.0002216283 0.0001550946 0.0005753787 -0.0004955342 -0.0005884497 -0.0000194027 0.0000165377 0.0007611629 0.0006358204 0.0003183375 -0.0002577109 0.0004579921 0.0007846849 0.0018091382 0.0000117334 0.0022852121 0.0000321546 -0.0009196534 0.0014484854 -0.0010728419 -0.0001946089 -0.0027844141 -0.0002840406 -0.0001595928 -0.0000970307 0.0005719817 0.0001688794 0.0012048874 -0.0106081277 -0.0088046814 -0.0039820224 -0.0019162727 -0.0003467360 -0.0003080483 0.0005623472 -0.0018754897 -0.0012360260 -0.0011412801 -0.0003974513 0.0002156637 0.0004992850 0.0000110007 -0.0001200572 -0.0002128667 -0.0000157650 0.0001070877 -0.0002410078 0.0000021160 0.0002280566 -0.0001082346 0.0000451286 0.0000527457 -0.0001800765 -0.0008074853 -0.0005106909 0.0000678880 0.0014812439 0.0008556110 -0.0003337927 0.0010503105 -0.0006991767 -0.0002663865 0.0005940200 -0.0004972638 0.0003964564 -0.0004357032 0.0000568256 0.0006740556 0.0004414831 -0.0009969743 -0.0002679258 0.0001127291 -0.0001508863 0.0002629918 0.0000855462 0.0000510581 0.0001870862 0.0003817461 0.0003479917 0.0000881970 -0.0002469068 -0.0002138894 0.0002059901 -0.0000890485 0.0000471181 -0.0009395220 0.0021544647 0.0014241133 -0.0003706548 -0.0000200467 0.0000478572 -0.0008287432 0.0021372734 0.0016739423 0.0062318511 -0.0038202272 0.0006367631 0.0033144290 0.0133781487 0.0086889612 -0.0101695235 -0.0129420314 -0.0116438107 0.0043203841 -0.0008536360 -0.0012074779 0.0004822412 0.0130788713 0.0151294691 -0.0062892683 -0.0071743154 -0.0112475535 0.0103256959 -0.0109568126 0.0385225716 0.0197879673 -0.0089186462 -0.0469211933 -0.0014597095 -0.0001519768 0.0004947590 0.0282874126 0.0118403594 0.0278051353 0.0100434620 -0.0232766811 -0.0209721586 -0.0118249333 0.0095857746 0.0406496317 0.0285951031 -0.0016438468 -0.0427111633 -0.0109312871 -0.0052317953 -0.0044574290 -0.0099671089 0.0068908010 0.0500361303 0.0208427036 0.0023389769 -0.0374100175 -0.0682857741 -0.0351762794 0.0612427186 -0.0217924631 -0.0251008138 -0.1119412899 0.0041134660 0.0016579304 0.0017397772 -0.0938824982 -0.0119425656 0.0664502323 -0.0099193315 -0.0428020513 -0.0866913799 0.0002416149 0.0012046687 0.0016620113 -0.0006173946 -0.0007644071 -0.0016822958 -0.0021920415 0.0024571362 0.0052290635 0.0035602632 -0.0014335657 -0.0048000170 0.0006661830 0.0026656334 -0.0045684367 -0.0077113030 -0.0019519618 0.0172632410 0.0130579791 0.0140121151 0.0360543579 -0.0261244744 -0.0432386366 -0.0565810530 0.0250502804 -0.0931691926 -0.2271354046 0.0598682231 0.0959554280 0.3847859587 -0.0065466005 -0.0200356402 -0.0874779511 0.0108576759 0.0461759182 0.0939962943 0.2070993202 0.1863559574 0.4767009035 -0.0983135181 -0.1794043710 -0.5537738076 0.0030291067 0.0024411960 0.0089925158 0.0031344446 0.0018293415 0.0019169729 0.0121616190 -0.0115411096 -0.0068875202 -0.0196868527 0.0001426672 0.0067473829 -0.0823015631 0.0295129575 0.0432198708 0.0767260563 -0.0485912137 -0.0528750343 -0.0045730928 0.0062440341 0.0016559451 0.0085132058 -0.0015943778 -0.0102466645 0.0342302614 -0.0123468917 -0.0198672600 -0.0488517361 0.0416245105 0.0291480928 0.0004659807 0.0032543227 0.0056818682 0.0237487227 0.0202622932 -0.0090255002 -0.0076489385 -0.0084529730 -0.0106470374 -0.0088486567 -0.0167838958 -0.0072630220 -0.0002953195 -0.0011414401 -0.0048967567 -0.0179828268 0.0123443786 0.0128044317 0.0076785936 0.0013613708 0.0074308069 0.0231495644 -0.0096433823 0.0014246543 -0.0124656883 0.0124485388 -0.0055239190 0.0193353188 -0.0111007513 0.0011198800 -0.0024956846 -0.0078256146 0.0047753822 0.0152476939 0.0208621174 -0.0219340265 -0.0099657861 0.0177703710 -0.0036796126 -0.0020419859 -0.0118106861 0.0039909044 0.0147910075 -0.0102951535 0.0305321068 0.0006735114 0.0074178650 -0.0053337743 -0.0210704091 -0.0253392280 -0.0015182592 0.0397122552 0.0196249759 0.0296642637 -0.0180116637 0.0082883699 -0.0174602739 -0.0094475283 -0.0090531996 -0.0014055195 0.0036959752 -0.0005461148 0.0020907754 0.0026423830 0.0022536482 -0.0030859067 0.0006886336 -0.0029814739 0.0038142117 -0.0081225775 0.0039974357 -0.0080989877 -0.0064400361 -0.0013260961 -0.0023867812 -0.0001163421 -0.0001404236 0.0009574563 0.0002248231 -0.0009967845 -0.0003624046 -0.0013093945 -0.0009685873 0.0007718759 0.0015876013 0.0021937924 -0.0003459749 0.0001619253 -0.0007852990 0.0000857114 -0.0001116035 0.0005459338 -0.0001557604 -0.0018384347 -0.0050352486 -0.0020204682 0.0045188131 0.0012104286 -0.0017545978 -0.0019012618 -0.0013707904 -0.0039692410 0.0006869267 -0.0009258520 -0.0008652476 0.0014082667 -0.0001415831 0.0027774956 -0.0224789919 0.0217475287 -0.0308235740 -0.0003543906 0.0014136563 -0.0009526903 0.0009255396 -0.0003831123 0.0001143317 0.0007455423 0.0000481848 0.0012560913 -0.0021549047 -0.0005029786 0.0002935452 -0.0002584963 -0.0010415474 0.0002476414 -0.0003621077 -0.0000935916 -0.0011658087 -0.0011656825 0.0003608226 -0.0064459029 -0.0007351453 0.0006505366 0.0035869618 0.0028589204 -0.0033087484 -0.0026577372 0.0024327471 -0.0006147910 0.0055653339 0.0009166530 0.0007744995 -0.0033906974 -0.0005171212 0.0004420495 0.0026077014 -0.0029014348 0.0049996006 -0.0615717175 -0.0080156511 0.0054207324 -0.0018191898 0.0030040915 0.0004604613 0.0007443070 -0.0011536580 0.0038498835 0.0025342822 0.0021314790 0.0007141096 -0.0005155552 -0.0012245847 -0.0003037762 0.0010409102 0.0008820723 -0.0001324439 -0.0010162387 0.0011200574 -0.0000641883 -0.0005568071 0.0002366842 0.0002872346 -0.0006435211 0.0003011885 0.0016579033 0.0010145853 -0.0001359087 -0.0030535650 -0.0016356654 0.0007175423 -0.0037123517 0.0014517611 -0.0002290263 -0.0003789352 0.0026617831 -0.0040576579 0.0055724655 0.0010489051 -0.0006344204 -0.0010562668 0.0014425544 -0.0011865562 0.0044984688 -0.0062222940 -0.0015148391 0.0023606724 -0.0020185110 -0.0008617127 -0.0004326977 0.0007781987 0.0001771930 -0.0000247526 0.0012379883 -0.0002215179 -0.0026871715 -0.0019845908 0.0018194536 -0.0044427314 -0.0028772073 0.0007391435 0.0002498344 -0.0000590023 0.0017459702 -0.0043745966 -0.0033323770 0.0080436996 -0.0121806123 0.0095973446 0.0259890654 0.1058295322 0.0792279350 -0.0561717162 -0.0906439767 -0.0790815504 0.0321275497 -0.0070120724 -0.0073403667 0.0185382204 0.0802306664 0.0984733830 -0.0540610773 -0.0645300991 -0.0995754772 0.1202950025 -0.0576211059 0.2998410807 0.1832828490 -0.1078348862 -0.3346088304 -0.0108547820 -0.0001277649 0.0031698600 0.2808989356 0.0621016837 0.2196805841 0.0901313853 -0.2115751670 -0.1875858915 0.0328375449 -0.0246191334 -0.1103175808 -0.0460457835 0.0104512356 0.0902278435 0.0243941487 0.0120001896 0.0105208639 0.0295436399 -0.0077458585 -0.0985771932 -0.0543815190 -0.0057990131 0.1000471704 0.1927389775 0.0968405908 -0.1692375747 0.0949687942 0.0896573085 0.2840763242 -0.0093608461 -0.0038234818 -0.0039402162 0.2564164496 0.0506759631 -0.1433079335 0.0328497697 0.1206975748 0.2420257454 0.0006908428 0.0082832833 0.0113172378 -0.0056003303 -0.0051171518 -0.0116191961 0.0037807593 -0.0056378942 -0.0113637833 -0.0080893669 0.0026181624 0.0096167064 0.0021211910 -0.0000438487 -0.0014008521 0.0253600222 0.0164835416 -0.0049267590 -0.0006085569 -0.0209902195 0.0145108208 -0.0011366302 -0.0063600758 -0.0089110980 -0.0026619329 -0.0368258943 -0.0213591275 0.0101566936 0.0140112356 0.0560996467 -0.0015656316 -0.0082224726 -0.0144650101 -0.0172818248 0.0212931635 0.0133239802 0.0282828094 0.0311599770 0.0888558063 -0.0322985686 -0.0093495756 -0.0926352549 0.0198679249 -0.0083095469 0.0379916224 0.0052921694 0.0036664398 0.0040515840 -0.0007042382 -0.0045463653 0.0009891050 -0.0205624462 -0.0255893649 -0.0118334565 -0.0096014890 -0.0062970649 -0.0011152079 -0.0180172164 -0.0329804221 -0.0085519234 0.0040803771 0.0246233019 -0.0138133153 -0.0003175222 0.0062365508 -0.0039873323 0.0084325939 0.0265661625 -0.0121649096 0.0085324436 0.0214387640 -0.0076142167 -0.0004865168 -0.0054803980 -0.0095715670 -0.0397357862 -0.0335585616 0.0148628231 0.0134201591 0.0147559621 0.0176833705 0.0151485385 0.0283645027 0.0123477354 0.0005803325 0.0010268682 0.0086580155 0.0338076189 -0.0212774719 -0.0233455154 -0.0162727597 0.0001373578 -0.0119047077 -0.0385230318 0.0173669862 -0.0048275776 0.0017189756 -0.0022248340 0.0006323343 -0.0059490651 0.0005648773 0.0008126119 -0.0001322876 -0.0000201235 -0.0000294079 -0.0020950905 0.0009494399 -0.0007035299 -0.0006091687 0.0009201816 -0.0000756894 0.0009988351 0.0004305604 0.0011351542 0.0016034960 0.0014675377 -0.0001099396 -0.0000600487 0.0001986003 -0.0002773575 -0.0015334156 -0.0019834900 -0.0001588210 0.0028619356 0.0011922611 0.0025658774 -0.0006493747 0.0000487367 -0.0013382226 0.0019715514 0.0007263323 -0.0001360654 0.0000516182 0.0001493197 -0.0000048225 -0.0009073825 -0.0009074652 0.0008718433 0.0001801189 0.0002772268 -0.0013161358 0.0167159776 -0.0099905678 0.0179584050 -0.0017992310 -0.0011361652 0.0007966487 -0.0003903756 0.0002077858 0.0003203793 -0.0012341583 0.0011307349 0.0013456570 0.0019463949 0.0003241689 -0.0014656257 -0.0008469843 -0.0014260230 0.0003759984 0.0010483641 0.0003770811 -0.0009639424 -0.0003003050 -0.0002023165 0.0003479691 0.0029121690 0.0005173367 0.0002234999 -0.0034583878 -0.0002838961 0.0002102909 0.0024196312 -0.0016100822 0.0006824240 -0.0024929997 0.0009006422 0.0008314781 -0.0015434018 0.0015393440 -0.0025924745 0.0149210763 -0.0128596549 0.0134025478 0.0014829229 -0.0009568620 0.0010572130 -0.0541870576 0.0389871258 -0.0808001190 -0.0084915633 -0.0154436439 -0.0152672883 -0.0041626446 0.0023595720 -0.0531809158 0.0570480023 -0.0047172384 0.0982405587 0.0085511512 -0.0125448082 0.0555239485 0.0654114639 -0.0493587944 0.0939893948 0.1367268782 -0.0825997707 0.2472085724 -0.2200196663 0.0621462737 -0.6287661785 -0.1387698082 0.0048943011 -0.2941716969 0.1927770276 -0.0441577265 0.5204461572 0.0000559635 0.0002086656 -0.0007363566 0.0009182381 -0.0015344783 0.0132614705 -0.0016143773 -0.0008194495 -0.0005176192 -0.0004285271 -0.0005259873 0.0021666986 -0.0011377547 -0.0043521997 -0.0017010880 -0.0028855128 -0.0006585259 0.0005219947 0.0017373429 0.0005456855 -0.0012531165 -0.0009308064 -0.0000758865 0.0009111892 -0.0019033405 -0.0002338840 0.0005253162 -0.0006092917 -0.0001304154 0.0008232944 0.0013078821 0.0006872782 -0.0002671964 0.0005457221 0.0004730258 -0.0000232608 -0.0004850556 0.0030360236 -0.0011048595 -0.0004319550 0.0015165921 -0.0024871572 0.0037773933 -0.0045578739 -0.0004632280 0.0028465542 0.0027824766 -0.0005478249 -0.0019447843 0.0003636299 0.0008369439 0.0055950563 -0.0054867930 0.0028570461 0.0010297823 0.0010386088 -0.0006251034 0.0003844082 -0.0013701440 -0.0023165553 0.0012056150 0.0020411596 0.0020962506 -0.0024989548 0.0029377207 0.0022659270 -0.0007459313 -0.0066877254 -0.0024391278 -0.0016894673 0.0026681081 0.0021167887 0.0022540285 -0.0009719840 -0.0000709802 0.0005364373 -0.0007414810 -0.0018691768 -0.0013268299 -0.0006315551 0.0003564370 -0.0007893227 0.0006529097 -0.0002901170 -0.0007036664 0.0007243506 0.0004233102 0.0007842707 0.0008101946 0.0014563356 -0.0035729996 -0.0045343763 0.0005664725 -0.0021492079 0.0083097593 -0.0032117508 -0.0002259451 0.0004499175 0.0021764357 -0.0029538994 0.0010180223 -0.0004873425 -0.0010684693 0.0036292881 0.0024329290 0.0005350670 -0.0003844609 -0.0021112506 0.0004060116 0.0004059280 0.0007564836 0.0002263132 0.0001281787 0.0001107963 0.0006926615 0.0002771227 -0.0004656146 -0.0009522218 -0.0000566385 0.0018449436 0.0036911419 0.0012710434 -0.0031282603 0.0036699388 0.0030832243 0.0053155474 -0.0001082885 -0.0000251500 -0.0000614811 0.0051427731 0.0017442081 -0.0013697072 0.0010020234 0.0025921435 0.0050635536 0.0008448794 -0.0006841693 -0.0003088317 -0.0005176483 -0.0004065105 -0.0009287341 -0.0000034272 -0.0000715428 -0.0000911946 -0.0000945840 -0.0000047065 0.0000577361 -0.0010101701 0.0004024933 -0.0000259199 -0.0024308613 -0.0000937129 0.0007332666 -0.0002536942 0.0011138071 -0.0002967657 0.0011573030 0.0015930795 -0.0009916640 -0.0034112585 0.0012156105 -0.0006378491 -0.0003666298 0.0057635921 -0.0008848272 -0.0002564524 -0.0018754662 0.0000165166 0.0019465840 -0.0018437067 0.0009278136 -0.0001902893 -0.0002965660 0.0047413855 0.0007276643 -0.0043911149 -0.0017342810 0.0007723589 0.0006998736 0.0010848883 0.0004942302 0.0005234800 0.0002968023 0.0000699465 -0.0018615562 0.0007310305 -0.0011669823 -0.0013689022 -0.0001908660 -0.0012456962 -0.0004517964 0.0034743999 0.0003072947 -0.0025430203 -0.0008601965 0.0002235382 0.0002195346 0.0002904754 -0.0002794161 0.0012437149 -0.0015964259 0.0025692496 0.0008802843 0.0022932270 0.0009632230 0.0054233534 -0.0014883714 -0.0016189421 0.0041463896 0.0000877709 0.0114944043 0.0016930781 0.0011270377 -0.0104621714 -0.0142706030 0.0021979016 0.0083897444 0.0026648808 -0.0027458032 0.0003091737 0.0020391779 -0.0036936191 -0.0159561617 0.0048637915 0.0089709129 0.0155311203 -0.0069412089 0.0019165454 0.0067716480 -0.0059685236 0.0055461887 0.0642028217 -0.0783359904 0.0241300659 -0.1878457613 0.0280019023 0.0290856033 0.0029696888 0.0055974605 -0.0052782990 -0.0634608919 0.0412798686 -0.0348213869 -0.0414283164 0.0156906318 0.0062498377 0.0317723147 0.0185626220 0.0255967120 0.0613894545 0.0545547028 0.0092732961 -0.0005794290 0.0052831354 -0.0063351512 -0.0654688938 -0.0836413991 -0.0057651481 0.1293941440 0.0494184116 0.1208398470 -0.0417841712 0.0106736976 -0.0516717562 0.0636882997 0.0230508277 -0.0083048954 0.0005603853 -0.0025190877 0.0001743657 -0.0032053238 -0.0055493634 -0.0014983002 0.0048455531 -0.0038399640 0.0008309237 -0.0017841430 0.0008942745 -0.0032206472 -0.0054364863 0.0006560672 -0.0055365080 0.0004698780 -0.0003690203 0.0008292332 0.0001346805 -0.0001714977 0.0001210659 -0.0004628219 0.0002200426 -0.0002092407 -0.0000672098 0.0003399780 -0.0004069839 0.0001294226 -0.0001831636 -0.0000052268 -0.0000269649 0.0004885988 -0.0001305858 0.0013165892 0.0002340846 0.0030848258 0.0021793267 -0.0008018343 0.0021356396 -0.0007310840 0.0001313185 -0.0013549122 0.0000952378 -0.0000010417 -0.0000760793 0.0004116127 -0.0004341897 0.0008194735 -0.0052803940 0.0048398671 -0.0082769804 -0.0002536805 0.0004378281 -0.0003641164 0.0022941516 -0.0013556863 0.0037344436 -0.0000469428 0.0000479416 0.0008582651 0.0010397242 -0.0000917684 0.0027262685 -0.0030358123 -0.0000845336 -0.0047272201 -0.0000242345 0.0006546731 -0.0025657702 -0.0036668232 0.0016653868 -0.0042753308 -0.0074711373 0.0039626896 -0.0154764411 0.0098633259 -0.0029516306 0.0311078273 0.0064955207 0.0008888835 0.0129661408 -0.0085687246 0.0025232167 -0.0233719953 -0.0003753943 -0.0004043196 0.0001556384 0.0002724159 0.0032624391 -0.0081192611 -0.0691454175 -0.0347939900 -0.0232502280 0.0004958238 0.0008034591 0.0006444378 -0.0014873519 0.0017465819 0.0014531437 -0.0001877083 -0.0001584750 -0.0002840021 0.0005902344 -0.0006602519 0.0000310773 -0.0002150525 0.0002777909 -0.0000718287 -0.0014402192 0.0001122728 0.0009352374 -0.0002702960 0.0004227179 -0.0002194668 0.0006829579 0.0021699173 0.0010173890 0.0003251386 -0.0027934752 -0.0017022983 -0.0013575952 0.0005110227 -0.0001549670 -0.0003837077 0.0006166487 -0.0000624615 -0.0002160238 0.0002115356 -0.0002827628 0.0058192255 0.0043028240 -0.0071800912 -0.0006720780 -0.0001106301 0.0018136075 0.0017804747 -0.0000229936 0.0000706467 0.0004506024 0.0016378545 0.0021697116 0.0000719043 -0.0002832110 0.0003676845 0.0002381668 -0.0012470154 -0.0007830145 0.0001538271 -0.0024070349 -0.0012690613 0.0003835897 -0.0026338047 -0.0016706701 0.0000525155 -0.0021388333 -0.0013940743 0.0693844812 -0.0287665552 -0.0058878962 -0.0156032362 -0.0676057605 -0.0674083084 -0.0108012200 0.0389986849 0.0219334995 -0.0156004779 0.0050062518 0.0027828099 -0.0341678652 -0.0117915847 -0.0252492337 0.0402573826 0.0498935331 0.0725716777 -0.1333720586 -0.0053262639 -0.1874543665 -0.1835731833 0.1252472213 0.1651027714 0.0058238045 -0.0010785464 -0.0011658527 -0.2539682670 0.0130703444 -0.1299625512 -0.0840677240 0.1768381523 0.1543064215 0.0252274590 -0.0163999017 -0.0883339669 0.0151973102 0.0184743778 0.0319740518 0.0116074657 0.0064771642 0.0057959589 0.0297754090 0.0115434291 -0.0181255442 -0.0422774581 -0.0018109259 0.0777059397 0.1778931812 0.0777957727 -0.1406172327 0.1367868093 0.1100781203 0.1995723196 -0.0052678944 -0.0022585917 -0.0022209058 0.2151603307 0.0769263452 -0.0568941506 0.0456021527 0.1004559689 0.2170375129 0.0017160791 -0.0036427517 -0.0045491914 0.0042586761 0.0014555000 0.0042735125 -0.0000134815 -0.0032329059 -0.0052633267 -0.0045278671 0.0002663835 0.0030948508 -0.0281895403 0.0162742557 -0.0026507835 -0.0691935864 0.0071546687 0.0200514473 -0.0126200249 0.0204908177 -0.0029557902 0.0383366356 0.0547278324 -0.0338289966 -0.1267873115 0.0245583201 -0.0113043222 -0.0202191135 0.2081028238 -0.0328454024 -0.0095066548 -0.0712345510 0.0020164260 0.0567296130 -0.0531163262 0.0300114018 -0.0093462276 -0.0135162076 0.1723241889 0.0243161269 -0.1263713312 -0.0693718632 0.0400620954 0.0238573457 0.0575266279 0.0236444589 0.0210326100 0.0178606186 0.0035877497 -0.0728444862 0.0341135291 -0.0572843229 -0.0761242691 -0.0122854129 -0.0276269622 -0.0171345553 0.1517730475 -0.0049762726 -0.1390852877 -0.0068928295 0.0136022011 0.0262515848 0.0034393831 -0.0156425518 0.0573449541 -0.0732418328 0.1189946006 0.0610988960 0.1012420719 0.0474441659 0.2360449719 -0.0753903172 -0.0000265735 -0.0016731005 -0.0026572659 -0.0114319549 -0.0093361462 0.0040748181 0.0040000783 0.0044368873 0.0047405987 0.0033517117 0.0075561541 0.0034937459 0.0009920313 -0.0002447352 0.0014864356 0.0076738312 -0.0061222172 -0.0053417769 -0.0033612857 0.0004937557 -0.0023850715 -0.0093286597 0.0037564240 -0.0017857860 -0.0119490990 0.0087425974 -0.0013791362 -0.0179910505 0.0003143076 -0.0073917562 -0.0097303360 0.0023474934 0.0010334984 -0.0086090147 -0.0149181133 0.0269072463 0.0114465727 -0.0071503468 -0.0027046856 -0.0153986957 -0.0087560626 -0.0096708626 -0.0310439099 -0.0097469881 -0.0409711150 -0.0102627786 -0.0044311973 -0.0100828420 0.0115780972 0.0230146376 -0.0070916296 -0.0902814936 -0.0345834842 -0.0910576468 0.0268251086 -0.0079947497 0.0284911137 -0.0007926814 0.0032665259 0.0031703160 -0.0023858815 0.0003210851 -0.0012110736 -0.0031333579 -0.0008391215 0.0033723005 -0.0026348031 0.0032859048 -0.0052397631 0.0024963888 -0.0019820678 -0.0003410988 0.0021888082 -0.0003096954 -0.0008803133 0.0008577787 -0.0008334600 -0.0008790678 -0.0002710724 0.0005205707 0.0004394759 0.0015387524 0.0015695142 -0.0007444127 -0.0016775705 -0.0023080753 0.0003464920 -0.0000315325 0.0009413075 0.0003488108 -0.0004508163 -0.0006789409 0.0002256695 0.0025779086 0.0093522596 0.0043248627 -0.0049958013 -0.0011355852 0.0017757137 -0.0000043712 0.0067991221 0.0030184871 -0.0004175968 -0.0000584044 0.0003176657 -0.0003742437 0.0008657446 -0.0002097506 0.0016622446 -0.0010901362 0.0046632759 0.0003412827 -0.0007114764 -0.0002217811 -0.0020393926 0.0048662531 0.0019798229 0.0016080041 -0.0013474034 -0.0009646946 0.0000624459 -0.0023772149 -0.0000704378 0.0042275464 0.0034255391 -0.0018854248 -0.0050427526 -0.0021755128 0.0017620804 0.0104313673 -0.0070882669 -0.0051825180 -0.0008428817 -0.0122496204 -0.0031843558 0.0151292767 -0.0025999793 -0.0037370293 -0.0059100772 -0.0161829647 0.0005025144 -0.0022647259 0.0061992996 -0.0000134898 0.0009131326 -0.0000217410 -0.0013688437 0.0011708417 -0.0033491109 0.0343383523 0.0181803292 0.0074318345 0.0052944355 0.0000510905 0.0003918819 -0.0003055576 -0.0000723560 -0.0001836878 -0.0000811117 -0.0002288751 -0.0001415641 0.0000274726 0.0001258403 0.0000413388 -0.0001472760 -0.0002608686 0.0003258329 0.0000572631 0.0001340057 -0.0000176830 -0.0000444925 -0.0000134825 -0.0000391174 0.0001476558 0.0000740680 -0.0001580013 -0.0001193572 0.0000883794 0.0002453527 0.0000743014 0.0005439374 -0.0001253707 0.0007553503 0.0004056804 -0.0007697112 -0.0006116568 0.0011450428 -0.0023255794 -0.0012837158 -0.0011443145 -0.0009436918 -0.0001996048 0.0003052522 0.0000279591 0.0013311185 -0.0008547042 0.0003237027 0.0000269705 0.0000829551 -0.0000635192 -0.0003198470 -0.0000108869 0.0000304589 -0.0002698824 -0.0000270086 0.0004088699 0.0003322337 -0.0003347223 0.0004155749 0.0001902477 -0.0000686621 -0.0003586600 -0.0002652404 -0.0002215454 0.0000647805 0.0003480387 -0.0122544398 0.0076459763 -0.0016634906 0.0008599474 0.0051602739 0.0062703333 0.0056819361 -0.0017885516 0.0017239922 0.0005265792 -0.0004202678 -0.0002527363 0.0045056080 -0.0025065230 -0.0017138745 -0.0035661181 -0.0046454382 -0.0047309743 0.0126317683 0.0012068979 0.0162270701 0.0235558888 -0.0126744893 -0.0116015745 -0.0004086876 0.0000571230 0.0000227718 0.0232103380 -0.0059776501 0.0080913214 0.0127582588 -0.0156088987 -0.0178401529 -0.0034198057 0.0029340686 0.0120141186 -0.0079583019 -0.0040102978 0.0001476593 -0.0004829687 -0.0005169694 -0.0009013113 -0.0040371949 -0.0029741909 -0.0031696746 0.0047024239 0.0006244311 -0.0086325037 -0.0235488657 -0.0156366918 0.0216227704 -0.0282697490 -0.0190046717 -0.0271242885 0.0005290135 0.0001357469 0.0002287415 -0.0253977374 -0.0112400770 0.0011869107 -0.0092389757 -0.0172660608 -0.0314099897 -0.0003073590 0.0003442890 0.0003711267 -0.0004054978 -0.0000176755 -0.0002099246 0.0002910908 0.0003482251 0.0003909435 0.0002823507 0.0001419134 0.0000961379 0.0173670575 0.0019832228 -0.0025752933 0.0068016007 -0.0307478916 -0.0016421099 0.0264822008 -0.0208676845 0.0024609960 -0.0528701183 -0.0675110677 0.0361232354 0.2303351831 -0.0374383830 -0.0112188680 0.0122430620 -0.2166162860 0.0634309254 0.0287009285 0.0512515768 -0.0049812355 -0.0356706473 0.0658993776 -0.0313790180 0.1505582003 -0.0103299780 -0.1632541448 0.0453817485 0.2035506885 -0.0112473342 -0.0052038189 0.0362822033 -0.0340039752 0.0079977007 -0.0139280542 0.0238211515 0.0300398578 -0.0477568265 0.0681617301 -0.0605140555 -0.1231713223 0.0131559306 0.1992495870 0.0894902396 0.4135164868 0.0137444883 -0.3159491166 0.1922903679 0.0390343070 0.0547082501 0.0183617237 -0.0373776516 0.0936540334 -0.1281805707 0.2914642527 0.1562474145 0.2924625393 0.0646186718 0.3249231749 -0.1453604012 -0.0000257078 -0.0000911346 0.0006139662 0.0010880860 0.0016402030 -0.0008518093 -0.0003331219 -0.0001719949 -0.0011507497 -0.0024532573 -0.0021742599 -0.0004657020 0.0001685225 0.0001966954 -0.0003311803 -0.0016861074 0.0002422076 0.0009383164 0.0015827614 -0.0009980912 -0.0000472587 0.0002635533 -0.0006853929 0.0008462330 0.0004009809 -0.0003829561 0.0000471601 0.0005566005 0.0000642180 0.0000946669 0.0003599195 0.0000270593 -0.0000689372 0.0001365677 0.0005545313 -0.0009865720 -0.0007043501 0.0000582091 0.0001972018 0.0006205704 0.0003844222 0.0004680114 0.0011691819 0.0003725586 0.0015285315 0.0003843687 0.0001235093 0.0004764023 -0.0003592216 -0.0007903598 0.0003060408 0.0032762996 0.0011499849 0.0032891689 -0.0016541189 0.0005941187 -0.0012755938 -0.0001304083 -0.0003622663 -0.0002462679 0.0013725643 -0.0004503377 0.0014811104 -0.0001964853 0.0001042045 -0.0002657540 -0.0008691602 0.0004507869 -0.0009328571 -0.0010566726 -0.0164374867 -0.0364689605 0.0302270428 -0.0079069206 -0.0122066201 0.0131447947 -0.0131897216 -0.0138886567 -0.0084291319 0.0064518626 0.0079840951 0.0234117731 0.0153868679 -0.0070825026 -0.0192035341 -0.0258058912 0.0032222380 -0.0023489686 0.0118835010 0.0057151459 -0.0057897139 0.0010913144 0.0027878278 0.0172984970 0.0915739366 0.0092471556 -0.0609535466 -0.0112090342 0.0266275366 -0.0050408418 0.0875237834 0.0352826215 -0.0092916946 -0.0049497283 0.0061308068 0.0019509457 0.0249698857 0.0072189503 -0.0457334363 0.0670897166 -0.0131856188 0.0095090663 -0.0140651794 -0.0124743886 -0.0567484262 0.1488306872 0.0615942005 0.0460547166 -0.0480866670 -0.0252801432 0.0013672420 -0.0724836913 0.0057632516 0.1209454946 0.0972009627 -0.0623931487 -0.1527447598 -0.0647124746 0.0507191569 0.3130033576 -0.2245931280 -0.1768167588 -0.0503821379 -0.3543186881 -0.1404001509 0.4724028100 -0.0925884655 -0.0742987654 -0.1712322256 -0.4718086739 0.0324598347 -0.0547667748 0.2023704316 -0.0248115666 0.0021444776 -0.0003140206 0.0005722278 0.0008359726 0.0010468146 -0.0493601540 -0.0006258373 -0.0002500348 -0.0002533489 0.0018810697 -0.0011322826 0.0025251725 0.0003104535 0.0002473430 -0.0014948281 -0.0006973287 -0.0003968639 0.0001555880 0.0000425399 0.0000146559 0.0002346607 0.0001037282 0.0001348065 -0.0002646115 0.0007876011 -0.0000988926 0.0001277716 0.0000036662 0.0001317726 0.0000004397 0.0004967741 -0.0052840091 -0.0028437190 0.0007971747 0.0055383353 0.0029566792 -0.0000168950 -0.0004487339 0.0001277757 0.0000163707 -0.0002645270 0.0005443844 -0.0006230893 0.0009118224 0.0000025205 -0.0019225829 -0.0013460861 0.0023533660 0.0021106289 -0.0046241627 0.0003125720 -0.0029722687 0.0057562120 -0.0037979569 -0.0003258606 -0.0002029173 0.0000977177 0.0003716091 -0.0006115493 -0.0000200805 0.0000153061 -0.0002716405 -0.0001813455 -0.0046305620 0.0051257562 0.0010721123 -0.0012299718 0.0018826631 -0.0021362157 -0.0012098354 -0.0016948508 0.0045596140 0.0003813309 0.0000135391 0.0000093741 0.0000526030 -0.0016717834 -0.0010397630 -0.0000943664 0.0003041758 -0.0002790976 -0.0022620262 0.0008525820 0.0001218336 0.0001460120 -0.0001365915 -0.0002227015 0.0008972880 0.0006605267 0.0012665589 0.0024116619 0.0007691531 -0.0031118163 -0.0010069001 -0.0005824833 0.0010274043 -0.0003240123 -0.0015333306 -0.0005709627 0.0035462412 -0.0003783998 0.0013319124 -0.0008463274 0.0025519362 0.0023333636 0.0002339254 -0.0001225508 -0.0006740573 0.0000312543 0.0001252797 0.0003738040 0.0001254313 0.0000104637 0.0000192477 0.0002214840 0.0001041907 -0.0002805309 -0.0003240982 -0.0000428364 0.0005979737 0.0018737216 0.0009163780 -0.0012106084 0.0009479880 0.0007599781 0.0016410738 -0.0001147596 0.0000007565 -0.0001884054 0.0018886601 0.0004902522 -0.0005178596 0.0002968767 0.0010126459 0.0016838489 -0.0004743721 0.0014872859 0.0015421315 -0.0003911557 -0.0001512240 -0.0003579713 0.0000311804 0.0000230425 -0.0000224191 -0.0000719859 0.0000280236 0.0000666241 -0.0004204826 0.0000263029 0.0000148205 -0.0000887129 0.0010175763 0.0000681881 -0.0006937983 0.0002433310 0.0000561715 0.0013460430 0.0017817205 -0.0009446301 -0.0058073613 0.0006369367 0.0003951257 -0.0005389859 0.0059421237 -0.0017930983 -0.0006878627 -0.0015277003 0.0001690703 0.0008230073 -0.0015603055 0.0007777004 -0.0036253768 0.0000902786 0.0043573187 -0.0010441968 -0.0047759233 0.0000930121 0.0002135883 -0.0013736725 0.0013749314 -0.0002613664 0.0004931319 -0.0008605377 -0.0011536738 0.0018134639 -0.0025912451 0.0022641914 0.0045992046 -0.0005007921 -0.0074521598 -0.0033719762 -0.0155963074 -0.0005484563 0.0118476315 -0.0072136826 -0.0014808261 -0.0019908250 -0.0007389252 0.0014061303 -0.0035257379 0.0048279605 -0.0109821202 -0.0058695872 -0.0111871256 -0.0024768332 -0.0123828880 0.0054575923 -0.0010712087 0.0009228914 -0.0004932462 0.0028906379 -0.0008131879 0.0009294425 -0.0037385887 -0.0057574967 0.0032570575 -0.0009125661 0.0031293028 0.0012668201 -0.0001317874 0.0022425057 -0.0001442648 -0.0037836752 -0.0026750733 0.0006597935 0.0068712235 -0.0045812663 -0.0014002934 -0.0079188388 0.0002828130 0.0043265846 -0.0007933564 0.0014161446 -0.0004271105 0.0068101070 -0.0006735079 -0.0000048828 0.0003172813 -0.0003160928 -0.0000138447 0.0026591529 -0.0001933561 0.0002390801 0.0013457767 -0.0003256717 -0.0000634600 -0.0012621714 -0.0009893832 -0.0012726665 -0.0016080135 -0.0011366646 -0.0003982561 -0.0001662241 0.0001494408 -0.0005498347 0.0004177865 0.0008558656 -0.0002979415 -0.0023635861 -0.0006552339 -0.0027507906 0.0027858309 -0.0010156197 0.0019169109 -0.0009917730 0.0001749954 0.0004211871 -0.0042261888 0.0012411218 -0.0044306138 0.0022560433 0.0009257274 -0.0007806812 0.0032594138 -0.0023992708 0.0054914632 0.0145983051 0.0027489640 -0.0185601308 -0.2678098516 -0.0064162850 0.1072607943 -0.0997564682 0.0835868713 0.0970449530 -0.0125515224 -0.0077732402 0.0053209973 -0.0731047271 -0.0856860363 0.0062152126 0.1007428964 0.1218133916 -0.0206695035 0.0645530747 -0.0534297080 -0.0590666452 0.0213058521 -0.0085024914 -0.0143531075 -0.0374633824 -0.5902561191 -0.1228332714 0.3007266346 0.0553356953 -0.1310371660 0.0698189321 -0.4979411956 -0.2495492864 -0.0034052834 0.0172992709 0.0100141325 -0.0085149414 0.0055556057 0.0072637589 0.0311841147 -0.0258213957 -0.0306168269 -0.0061665094 0.0028887927 0.0017591380 -0.0112894596 0.0209987653 0.0099676849 0.0115467987 -0.0016599577 -0.0048446779 0.0022289932 -0.0112873469 -0.0000915825 0.0186792157 0.0132383127 -0.0095595571 -0.0166910708 -0.0112146971 0.0049391817 0.0569520941 -0.0304214373 -0.0315546328 -0.0062183546 -0.0639168270 -0.0234556245 0.0702862257 -0.0146777902 -0.0124480026 -0.0199534772 -0.0899237710 -0.0010134411 -0.0217428606 0.0217045952 0.0022836663 -0.0028971923 0.0117718653 0.0004813199 0.0040193175 0.0084932352 0.1245620356 0.0009055617 0.0005575609 0.0005691159 0.0004090452 0.0016624326 -0.0047693790 0.0023621467 -0.0025840465 -0.0020254934 0.0000124686 0.0003323835 0.0000019739 0.0002837556 0.0001693929 0.0001472631 -0.0001114324 -0.0001896992 -0.0000320514 -0.0000795022 -0.0002653056 -0.0004303048 -0.0002183574 -0.0000779873 0.0000746941 -0.0005474155 -0.0054364440 -0.0029639345 -0.0004355146 0.0061364953 0.0036445794 0.0006444174 0.0000842950 0.0000197528 -0.0005310500 0.0009455834 -0.0001855340 -0.0000212598 0.0004115032 0.0004350535 -0.0002503237 -0.0003089046 0.0000713668 0.0005425908 -0.0001741055 0.0047415731 -0.0011282016 0.0019554329 -0.0016959365 0.0002376431 0.0002646222 -0.0001340329 0.0001255198 -0.0006380932 -0.0006627113 0.0003577719 0.0001142592 0.0002645711 -0.0006670662 0.0050977633 0.0023774599 -0.0008647022 0.0046205000 0.0027095707 -0.0000154632 0.0031899281 0.0030539962 -0.0012010406 0.0003130391 0.0001071996 0.0001736849 0.0011693192 -0.0001685853 0.0006414442 -0.0006252205 0.0005006740 -0.0005472711 0.0001709311 0.0000229171 0.0003433382 0.0000832413 0.0000020237 0.0000428614 -0.0003601976 -0.0000883752 -0.0053820493 -0.0041608875 0.0037884689 0.0067528788 -0.0026064494 -0.0051630944 0.0000258568 -0.0003133520 -0.0001754730 0.0018409847 -0.0005158527 0.0011580765 0.0021350692 -0.0017479687 -0.0016654093 -0.0006428742 0.0003115521 0.0016875468 0.0007952860 -0.0002086616 -0.0017190071 -0.0006366903 -0.0001128840 0.0000948300 -0.0007712535 0.0001956924 0.0015681986 0.0012656964 -0.0002030192 -0.0017059606 -0.0059242074 -0.0025555799 0.0031448056 -0.0013607486 -0.0017282523 -0.0047977301 0.0003822011 0.0001451508 0.0009580570 -0.0043891673 -0.0035690935 0.0028743500 -0.0015412364 -0.0005077959 -0.0050937486 -0.0001292451 0.0001544458 0.0001074592 -0.0000171418 0.0000845579 0.0001507449 -0.0000214683 -0.0003615487 -0.0001890017 0.0003010282 -0.0001459916 -0.0001364662 -0.0007472332 -0.0007869017 0.0005926897 0.0010381045 0.0013017251 -0.0008918655 -0.0019395961 0.0022803350 -0.0005278852 0.0034938818 0.0040097475 -0.0021686316 -0.0164556394 0.0035807809 0.0006412300 0.0004349339 0.0115285546 -0.0033481605 -0.0023751957 -0.0016774331 0.0001949090 0.0019798296 -0.0045153624 0.0020196448 -0.0137373025 0.0018969010 0.0086127131 -0.0049031599 -0.0156273279 0.0027008246 -0.0001705901 0.0002546254 -0.0011796645 -0.0001324849 -0.0005217463 0.0004918580 0.0009499353 -0.0003957110 0.0015014532 -0.0014371224 -0.0028629086 0.0002860309 0.0054623712 0.0029298120 0.0098889496 0.0006096941 -0.0080047813 0.0051327346 0.0010576577 0.0016604573 0.0002804968 -0.0008598896 0.0019293286 -0.0027574040 0.0072342991 0.0041847697 0.0070824605 0.0010999550 0.0064953762 -0.0031259806 -0.0010416336 -0.0018446225 0.0025491573 0.0007036242 0.0062319631 -0.0041108128 -0.0011630372 -0.0001706967 -0.0049296184 -0.0057745133 -0.0026943738 0.0026878489 0.0018372053 0.0012237719 0.0060711774 0.0200057296 -0.0119923411 -0.0118770535 -0.0095424130 -0.0015155055 -0.0102283077 -0.0238502264 0.0103935730 -0.0009314736 -0.0204487827 0.0386103931 -0.0130057296 0.1917461648 -0.0140726257 -0.0118520363 0.0136267878 -0.0009717303 -0.0024968678 0.0715108419 -0.0132697398 0.0098145681 0.0405636649 -0.0188541545 -0.0001773873 -0.0261197013 -0.0223521619 -0.0212737819 -0.0461572247 -0.0268574238 -0.0113875335 -0.0024463032 0.0002453061 -0.0040648119 0.0226215591 0.0341101911 -0.0019637654 -0.0832670611 -0.0293363351 -0.0861688132 0.0245023401 -0.0038398277 0.0338782694 -0.0545778564 -0.0185332017 0.0063701189 0.0009771914 0.0004215401 -0.0008125971 0.0031507065 0.0052740220 0.0001888039 -0.0028131269 0.0023988439 0.0029406393 -0.0022017520 0.0007475865 0.0004467214 0.0135365226 0.0000560934 -0.0035600170 0.0045099064 -0.0037602025 -0.0046603245 0.0006153148 0.0002844759 -0.0003685943 0.0032040031 0.0036214799 -0.0000384571 -0.0042620347 -0.0052974677 0.0009696257 -0.0032655070 0.0023044417 0.0028541363 -0.0008545378 0.0005907908 0.0005999387 0.0008331979 0.0252260584 0.0038579507 -0.0134183843 -0.0021620333 0.0047373149 -0.0035025677 0.0223008907 0.0114355280 0.0002527755 -0.0008881695 -0.0004980130 0.0004717419 -0.0000948266 -0.0001963088 -0.0029483571 0.0027655532 0.0000527682 0.0003462642 -0.0001313008 -0.0001784814 0.0003492310 -0.0002785199 -0.0001991923 -0.0002958545 -0.0002021667 0.0001383761 -0.0002563668 0.0001735720 0.0001354368 -0.0003400467 -0.0002206928 0.0001081382 -0.0000048803 0.0001997590 0.0000099586 -0.0010417273 0.0002017675 0.0001749067 -0.0001937879 0.0016193113 0.0003565914 -0.0006525385 -0.0000401011 0.0004697800 0.0001540975 0.0020741621 0.0004468230 0.0012012959 0.0001545807 -0.0003458328 0.0003249886 -0.0003441080 0.0004965419 -0.0015124832 -0.0006410822 -0.0173180774 0.0318418690 0.0189788284 0.0105890606 0.0003232263 -0.0006028046 0.0002160960 0.0010150711 -0.0006011921 -0.0007624100 0.0001415861 0.0000394614 0.0000080576 -0.0005598493 0.0002545524 0.0004384688 0.0004549316 -0.0003621416 -0.0002280720 0.0008323529 0.0000501449 -0.0007053421 0.0002582770 -0.0001300498 -0.0001285761 -0.0002459809 -0.0016046585 -0.0008372764 -0.0002004763 0.0017882046 0.0011544305 0.0011590285 -0.0009232227 0.0000895250 0.0000632907 -0.0000492581 0.0004620136 -0.0021148519 0.0024293982 0.0007759989 -0.0035049945 -0.0023254363 0.0044221741 0.0007918244 -0.0012942037 -0.0016964265 0.0003431348 0.0003856532 -0.0008677163 -0.0004392431 -0.0009086540 -0.0006861746 -0.0000255628 0.0002837467 0.0001727627 -0.0004708658 -0.0005625464 -0.0004951582 0.0000220790 0.0013548419 0.0006755236 -0.0002494516 0.0018113394 0.0010565625 0.0001050763 0.0013544268 0.0008223369 -0.0363120922 0.0167024216 0.0014890197 0.0018266826 0.0125361491 0.0154308769 0.0138028639 -0.0031489953 0.0034322151 0.0017420391 -0.0008503337 -0.0000222791 0.0129360376 -0.0084396344 -0.0050079071 -0.0096644188 -0.0102615580 -0.0152950960 0.0445293238 0.0089540392 0.0376777652 0.0524239580 -0.0345421892 -0.0213334533 -0.0009916674 0.0004383648 0.0000707582 0.0726980567 -0.0158326835 0.0226692646 0.0231178789 -0.0469739600 -0.0367888956 -0.0042010388 0.0033114422 0.0183158039 -0.0153964157 -0.0066910170 0.0021660046 -0.0005442138 -0.0006169210 -0.0008248987 -0.0078492066 -0.0063074157 -0.0096133095 0.0090026714 -0.0003403635 -0.0146428597 -0.0452981796 -0.0205538162 0.0325448076 -0.0460218979 -0.0322296685 -0.0393688330 0.0007804734 0.0002735961 0.0003217266 -0.0476917199 -0.0242419655 -0.0008190190 -0.0197150999 -0.0239205146 -0.0573737358 -0.0007860898 0.0004408044 0.0004317957 -0.0010648582 0.0000326133 -0.0003238406 0.0005178283 0.0005403070 0.0005183464 0.0006012952 0.0002771435 0.0001228019 -0.0161622122 -0.0216998637 0.0145952273 0.0317560627 0.0344999254 -0.0238904293 -0.0513226155 0.0583391529 -0.0128162472 0.0900691669 0.1036204233 -0.0557427551 -0.4361911759 0.0910376053 0.0148418388 0.0077040746 0.3014607611 -0.0911504969 -0.0631081907 -0.0416899798 0.0051187816 0.0506993797 -0.1169060537 0.0520012992 -0.3623563412 0.0509649095 0.2215443390 -0.1310181328 -0.4088114525 0.0733936735 -0.0087026738 0.0010171241 -0.0328570170 -0.0039133413 -0.0152154661 0.0100214625 0.0197428034 0.0017920842 0.0254981265 -0.0236214230 -0.0508362622 0.0084788703 0.1196667494 0.0684097362 0.1940014495 0.0182781762 -0.1551444039 0.1085634357 0.0201443987 0.0338213385 0.0043563933 -0.0162168642 0.0325911254 -0.0493652993 0.1354115950 0.0795809388 0.1277599089 0.0104276212 0.1001362038 -0.0548194650 -0.0004724450 0.0006779180 0.0001866466 0.0029516561 0.0008773425 -0.0001623570 -0.0021528947 -0.0027762067 0.0001796385 0.0019345904 -0.0003514834 -0.0009946281 -0.0004866629 0.0005738630 0.0003023826 0.0001170943 0.0001511364 -0.0003201509 0.0008153182 -0.0008846938 -0.0003933392 -0.0011280539 0.0005679433 0.0005234533 -0.0004884252 0.0007846464 -0.0003282886 0.0032600304 -0.0002199593 -0.0008522861 0.0001873717 0.0002426974 -0.0000265540 0.0010078089 -0.0006029201 0.0003564346 0.0003875474 -0.0007299615 0.0001259306 -0.0004432631 0.0002228003 -0.0008202023 -0.0007249024 -0.0003768374 -0.0001957643 -0.0000580015 0.0000294598 0.0002054466 0.0009875724 0.0007016700 -0.0002220860 -0.0005409896 -0.0013375108 -0.0022191571 0.0000761859 0.0001418817 0.0008631518 -0.0009838773 -0.0003489748 0.0001013046 0.0001636011 -0.0004627348 0.0006184108 0.0005815364 0.0005915853 -0.0005660558 -0.0000163739 0.0002651521 -0.0005318189 -0.0017727104 0.0014104710 -0.0115546262 -0.0069821656 0.0020330671 0.0032901398 -0.0034506091 0.0032940786 0.0032627629 -0.0001211820 0.0000049066 0.0000521543 -0.0044830237 -0.0047171391 0.0014024752 0.0047470378 0.0058069022 -0.0019389161 0.0017504140 -0.0024092141 -0.0014165553 0.0015188213 0.0014710562 -0.0016276575 -0.0042870278 -0.0306836925 -0.0083142416 0.0200460140 -0.0003287390 -0.0029983539 -0.0044830819 -0.0133365088 -0.0178698025 -0.0007340705 0.0010714192 -0.0025568556 0.0043118307 -0.0028426275 0.0057804707 -0.0183881953 0.0195061919 -0.0470812751 0.0023267959 -0.0014571113 -0.0016623655 -0.0002995389 0.0034602730 0.0007080961 0.0014918235 0.0002674779 -0.0012093324 -0.0020117463 -0.0027299119 0.0009932367 0.0043428726 0.0044288875 -0.0006183847 -0.0057877629 -0.0029716015 0.0025232732 0.0128088795 -0.0063840716 0.0113864673 -0.0027051276 -0.0132785853 -0.0015480293 0.0118641208 -0.0007337546 -0.0099283969 -0.0089864071 -0.0155839928 -0.0044977178 0.0006990719 0.0049127090 -0.0009659523 -0.0009032607 -0.0003505101 0.0007214163 0.0003278349 0.0030251413 -0.0060790663 -0.0003331395 0.0000647303 0.0011579997 -0.0394160403 -0.0099718078 0.0371790342 -0.0702292868 0.0879459675 0.0751907021 0.0308058548 0.0103997665 -0.0007111327 -0.0063716572 -0.0053795180 -0.0024590460 -0.0000267567 0.0025296938 0.0009463776 0.0012235272 0.0024131596 0.0016518833 -0.0008807749 0.0009526941 0.0003479644 0.0014425391 0.1770591330 0.1035782785 0.0054246349 -0.2039891074 -0.1175503272 -0.0073306141 0.0037575840 -0.0013827721 0.0068717293 -0.0132528021 -0.0014097700 -0.0008510384 -0.0042178345 -0.0040531874 -0.0049185767 -0.0029436003 -0.0082332449 0.0008426183 -0.0028219619 -0.0113927108 -0.0027508489 -0.0060604759 0.0094143282 -0.0016408416 0.0026516231 0.0088750585 0.0007467174 -0.0020028331 0.0005797211 -0.0015889122 0.0055191314 0.0025948771 0.0324423686 -0.1884341262 -0.0961147652 0.0323659462 -0.0825089467 -0.0624611686 0.0206493439 -0.1519056468 -0.1242900849 -0.0008641248 0.0005376724 0.0001508620 0.0001243454 0.0001932173 0.0004632296 0.0001870537 -0.0000041292 -0.0001658181 0.0002597927 -0.0000490179 0.0000356693 0.0003613613 -0.0004143240 -0.0001009913 -0.0004641138 -0.0003223092 -0.0005415904 0.0029569278 0.0003718401 0.0013332838 -0.0006332888 -0.0005245981 0.0010099575 -0.0000730919 0.0001312211 0.0002163844 0.0033921476 0.0002702850 0.0002755313 -0.0002837641 -0.0002792000 -0.0008880939 -0.0027606890 -0.0002167249 0.0032115889 0.0027408919 -0.0000198447 -0.0020601410 -0.0031972296 -0.0016077791 -0.0014575388 -0.0009989766 -0.0002616696 0.0011785797 0.0033529242 0.0006253298 -0.0040640264 -0.0198240473 -0.0118557142 0.0084352606 0.0098234338 0.0177746123 0.0112058326 0.0011895153 0.0007923952 -0.0003978838 -0.0097687189 -0.0030959885 0.0028387485 0.0029586442 -0.0014423171 -0.0056233706 -0.0000186906 -0.0000704611 -0.0000308399 -0.0001024819 -0.0000098868 -0.0000773442 -0.0000594708 0.0006013531 0.0011361101 0.0000191407 -0.0003314823 -0.0002279258 0.0000618315 -0.0003597138 0.0001293559 0.0006976217 0.0001940307 -0.0002960718 -0.0004902303 0.0006437671 -0.0001216662 0.0006874537 0.0006942231 -0.0003801748 -0.0041319770 0.0008549053 -0.0000851820 0.0003248990 0.0016340842 -0.0005966698 -0.0006090205 0.0000064993 0.0000084554 0.0002840193 -0.0009270656 0.0003935296 -0.0035867463 0.0006526066 0.0013623599 -0.0014794542 -0.0036598380 0.0009766183 -0.0002943956 -0.0001662886 -0.0006091233 -0.0001203462 -0.0002888996 0.0001611242 0.0002279843 0.0003913908 0.0001254819 -0.0000931619 -0.0003488434 0.0001917377 0.0015613488 0.0009215870 0.0016118746 0.0004566608 -0.0017169101 0.0015716305 0.0002342834 0.0004900960 -0.0000303863 -0.0001706722 0.0001424767 -0.0003477591 0.0013479236 0.0009872513 0.0012607402 -0.0004212067 -0.0003317642 -0.0003854033 0.0622712834 -0.0345309899 -0.0630569929 -0.2773683574 -0.1647720847 0.0629922281 0.2293063002 0.2681012218 0.0705050730 -0.0181195282 0.1681725923 0.1004437576 -0.0142510159 -0.0868604787 -0.0794719577 -0.1667002957 0.2466630115 0.1567144791 -0.0452476616 0.1504933841 0.1963386134 0.5144042957 -0.1578107445 -0.0961163494 0.0052430741 -0.0059344092 0.0016660341 -0.0305706281 -0.0053380986 0.0058898610 0.0010107491 -0.0075911843 0.0028134087 -0.0035691473 0.0174058572 -0.0089293481 -0.0110312596 0.0102246603 -0.0029919014 -0.0107450101 -0.0109149805 -0.0028979309 -0.0048048667 -0.0185379953 0.0046568736 0.0024627916 0.0067217178 -0.0031484383 0.0046266651 0.0065165159 0.0009820470 -0.0197000819 0.0003398322 -0.0235631214 0.0059380489 -0.0015278964 0.0053793433 0.0065731495 0.0016587778 0.0000832021 -0.0079248748 -0.0005125052 -0.0023384797 0.0096667470 0.0050650458 -0.0079071992 0.0015740171 -0.0035036893 0.0114416991 0.0556358649 -0.0336895753 0.0708113378 -0.0084098184 -0.0131443365 0.0036224467 0.0006389157 -0.0029751142 -0.0014918740 -0.0045580630 0.0001792366 -0.0005599392 0.0081019508 0.0046647995 -0.0032249305 -0.0049274464 -0.0037284429 0.0031130234 0.0031659111 0.0019851590 -0.0026082935 -0.0028213380 -0.0003477895 0.0028463758 0.0068971712 0.0292340275 0.0034809393 -0.0340465979 0.0087017517 0.0118194302 0.0170538264 -0.0137881700 0.0147825609 0.0009615274 -0.0028736918 0.0100864675 -0.0230635518 0.0234095553 -0.0412987818 0.2420505898 -0.2221525932 0.3796754209 -0.0097518745 0.0053582019 0.0210227303 -0.0108506908 -0.0023734214 0.0046024817 0.0036779759 0.0188960753 -0.0056143027 0.0080986078 -0.0069782586 -0.0057085090 0.0066028914 0.0055975686 -0.0018884678 0.0111674921 -0.0058680533 -0.0041594969 0.0000280899 0.0278185997 0.0375242700 0.0128883730 -0.0598799886 -0.0002802940 0.0048300844 0.0071618763 -0.0068039649 0.0067371966 -0.0735854155 -0.0207262271 -0.0638127953 -0.0351751923 0.0238214353 0.0013080790 0.0012329868 -0.0007718983 -0.0004901085 -0.0025592695 -0.0141666299 0.0102022744 0.0081032181 0.0022500729 -0.0282184364 0.0760941966 -0.1195119577 -0.0013962202 0.0126240273 0.0224330998 0.0072083707 -0.0006585749 -0.0041066208 -0.0041452484 0.0004374918 0.0000492629 0.0029393502 -0.0026826603 -0.0001188739 0.0017954965 -0.0006892530 0.0001747708 0.0010646854 -0.0003517224 -0.0001075043 -0.0038010021 0.0194205330 0.0101097795 -0.0062228635 -0.0238909182 -0.0101183509 0.0002038920 -0.0030375921 -0.0011918160 -0.0006685545 0.0022275745 0.0045532798 -0.0075314285 0.0123222525 0.0064195105 -0.0023537469 -0.0020836831 0.0112042622 -0.0012305019 0.0038569998 -0.0136754084 0.0001280486 0.0011735468 -0.0011453670 -0.0011995580 -0.0025358315 -0.0012888302 -0.0009763483 0.0030171901 0.0021199058 -0.0022833652 0.0006211762 -0.0003573365 0.0210683806 -0.0429992694 -0.0280595008 0.0047044244 0.0271473634 0.0114863909 0.0166299081 -0.0218877448 -0.0309291257 0.0104644016 -0.0066271034 0.0021082293 0.0009905509 -0.0024303022 -0.0042194849 -0.0050858146 0.0000466645 -0.0022278762 -0.0012421744 0.0006822098 0.0004344034 -0.0027635555 0.0028054661 0.0019748766 0.0020650791 0.0019014043 0.0021677209 -0.0085800045 -0.0067452677 -0.0037863175 -0.0173947588 0.0106782933 0.0051268639 0.0005304791 -0.0002716333 -0.0000183658 -0.0108290044 0.0030461990 -0.0007084444 -0.0092736458 0.0115840757 0.0103736471 0.0032967610 0.0013069600 0.0029538468 -0.0081216538 -0.0018035459 0.0017326267 0.0027115862 0.0011670150 0.0009341816 -0.0010349082 -0.0011498695 -0.0027237479 -0.0010319576 -0.0015768798 -0.0007845968 0.0106936229 0.0111227402 0.0000469110 -0.0300979347 -0.0295258151 -0.0311163841 -0.0009205563 0.0000348176 0.0002306951 -0.0015579289 -0.0007025499 -0.0029509063 -0.0149672650 -0.0102771826 -0.0194226785 0.0003028466 0.0000366057 0.0000111126 0.0002061332 -0.0000670404 -0.0002007146 0.0002710518 -0.0004853753 -0.0006553439 -0.0001022403 0.0002373945 0.0005980329 0.0028197665 0.0087211665 -0.0041542833 0.0067219377 0.0152411081 -0.0059732423 -0.0009748933 -0.0186183119 0.0075397429 0.0007196026 0.0048195883 -0.0022550070 0.0054256652 -0.0205076012 0.0066033501 -0.0188057268 0.0410935922 -0.0116157568 -0.0002815537 -0.0137894246 0.0044748028 -0.0044677805 0.0063391635 -0.0012596071 -0.0131261235 -0.0103494669 0.0130263767 0.0133324819 0.0314473406 -0.0159993924 0.0011256135 -0.0128029975 0.0116965365 -0.0000409261 -0.0077102682 0.0067499793 0.0026259902 0.0128088236 -0.0059532092 -0.0041452123 -0.0075807989 -0.0005728870 -0.0054394368 0.0088598197 -0.0175880710 0.0026505095 -0.0307395496 0.0277526148 0.0035246726 0.0176311616 -0.0093558053 -0.0009210526 -0.0038827058 0.0023745665 0.0087997683 0.0210970777 -0.0033961881 -0.0180982113 -0.0402389618 0.0024329024 0.0435553419 -0.0583207171 0.0665633471 -0.0612449025 0.1709905670 -0.1117875351 0.1284514555 0.1889606370 -0.1808299389 -0.3863017185 -0.2616948398 -0.0058017154 0.0085793638 -0.0531732013 0.0728803598 0.3483957200 -0.0749471968 -0.1778317093 -0.2911706642 0.1160889795 -0.0435616509 -0.0526998039 0.1179592742 -0.1461803514 0.0407227768 -0.0448665809 0.0135733714 -0.2491526824 -0.0371657194 0.0457778268 0.0047669235 -0.0556164681 0.0205772511 -0.0308513722 0.1181975011 -0.0580749368 -0.0629392221 0.0809408791 -0.0265763919 -0.0696611781 -0.0782308275 -0.0078993069 -0.0349867387 -0.1273154624 0.0258303394 0.0153413654 0.0503936990 -0.0242534106 0.0393302626 0.0476260462 0.0058755809 -0.1518736667 -0.0099752903 -0.1987540061 0.0390791177 -0.0071080500 0.0315846238 0.0433762806 0.0127291315 0.0014571391 -0.0212912094 0.0013476613 -0.0149696158 0.0113228398 0.0050786188 -0.0096835693 0.0031470588 -0.0079855335 0.0288740239 -0.0160139422 0.0104868952 -0.0165300082 0.0118540090 0.0108779715 -0.0032472000 0.0007005751 0.0013096737 -0.0000541786 0.0024275916 0.0002316540 -0.0002677970 -0.0037816699 -0.0001150423 0.0014064920 0.0010396700 -0.0010403782 -0.0011652545 -0.0023322928 0.0005512865 0.0021380455 0.0002395204 -0.0040845812 -0.0018767333 0.0000295247 -0.0046255767 0.0075115034 0.0125729751 -0.0060076598 -0.0078546277 -0.0066833780 0.0170229845 0.0015617222 0.0002754787 0.0008751773 -0.0035913913 0.0056972860 -0.0068055941 0.0119555968 -0.0717763850 0.0645868097 -0.1054546895 0.0037435752 -0.0020876259 -0.0063125930 0.0037531911 0.0011168722 -0.0015486442 -0.0010145642 -0.0064709219 0.0012750145 -0.0032209314 0.0026628642 0.0020168005 -0.0019223831 -0.0020560885 0.0005277947 -0.0042299606 0.0017930262 0.0016916812 0.0024693047 -0.0106092106 -0.0114550333 -0.0042126125 0.0230791079 0.0019001130 0.0005240230 -0.0038569895 0.0007840984 -0.0030103027 0.0232830491 0.0066042902 0.0236517585 0.0133812679 -0.0085413513 0.0034799445 0.0003898028 -0.0018002717 -0.0074537052 -0.0010747670 0.0673057448 0.0701175934 0.0584708668 0.0292183024 0.0096277793 -0.0233650418 0.0386713208 -0.0001298720 -0.0031380557 -0.0065562008 -0.0029323449 -0.0002775497 0.0012789424 0.0018296427 -0.0007658680 -0.0007955947 -0.0020228368 0.0028443534 0.0008133507 -0.0010701298 0.0001282702 0.0011878686 -0.0004137498 0.0003152767 0.0003977037 0.0017299040 -0.0065806454 -0.0036188092 0.0022330534 0.0078649036 0.0032453848 -0.0004795433 0.0003218212 0.0039488954 0.0027254726 -0.0050037342 -0.0039833556 0.0068653724 -0.0137826509 -0.0076486179 0.0027736418 0.0011069158 -0.0129215400 -0.0002680386 0.0007257001 0.0068765641 -0.0011324500 0.0015944439 0.0002795659 0.0007303232 0.0014807432 0.0009017382 0.0000409971 -0.0003285540 0.0000466823 0.0010441597 0.0008042682 0.0009384017 -0.0070042132 0.0138479015 0.0087722337 -0.0016190447 -0.0102456211 -0.0045805639 -0.0054651378 0.0069897454 0.0101378262 0.0794519857 -0.0504847412 0.0126410036 0.0050794943 -0.0125060472 -0.0263625418 -0.0363139308 -0.0010740589 -0.0158331233 0.0009909775 0.0010740108 0.0012509555 -0.0234781600 0.0231513790 0.0177661466 0.0152545531 0.0119622770 0.0130182836 -0.0900049350 -0.0442178741 -0.0307796321 -0.1160134215 0.0747135953 0.0286002303 0.0009983688 -0.0004534624 0.0001799362 -0.1142995791 0.0329859331 -0.0214604599 -0.0603317747 0.0749625621 0.0693714651 -0.0000692465 0.0026325269 0.0229229941 -0.0339459478 -0.0127711270 0.0114705137 -0.0034077793 -0.0014422524 0.0001352718 -0.0170211651 -0.0173451348 -0.0330773406 0.0202654590 -0.0010136609 -0.0214259475 -0.1074935617 -0.0333608714 0.0487859863 -0.0744269375 -0.0426292816 -0.0403330083 0.0022292363 0.0011169925 0.0004797078 -0.1101386913 -0.0559136105 -0.0146011087 -0.0397845099 -0.0334817203 -0.1063614789 0.0016256632 -0.0003557406 -0.0000332779 0.0011217563 -0.0006793731 -0.0006755951 0.0009941739 0.0008353573 0.0008625647 0.0017283073 0.0003854065 0.0000207262 0.0170397476 0.0616751667 -0.0290062453 0.0372227345 0.0999185742 -0.0382878973 -0.0038240966 -0.1251332192 0.0501898077 0.0032466413 0.0317211119 -0.0145648353 0.0557020876 -0.1395168829 0.0419466678 -0.1325507846 0.2831310863 -0.0807053129 -0.0009506370 -0.0931083788 0.0309452003 -0.0278723967 0.0427689102 -0.0094383040 -0.0763393965 -0.0738435960 0.0805801455 0.0973213990 0.2198710751 -0.1088649043 0.0038778626 -0.0877138364 0.0743770684 -0.0021786815 -0.0561567117 0.0464592554 0.0185746808 0.0891769354 -0.0412677196 -0.0271617288 -0.0513164209 -0.0020112660 -0.0322067170 0.0655193643 -0.1130908292 0.0221422345 -0.2154547156 0.1970382990 0.0255906403 0.1217420921 -0.0624898455 -0.0068033245 -0.0268035025 0.0156485238 0.0712900721 0.1494203884 -0.0111355749 -0.1308596706 -0.2874870733 0.0166296592 -0.0141763553 0.0181476488 -0.0210310869 0.0188005732 -0.0547209765 0.0355589381 -0.0412543659 -0.0605400834 0.0576773220 0.1201281348 0.0815698512 0.0015004392 -0.0024025699 0.0170859126 -0.0246733081 -0.1172806043 0.0250005595 0.0600556619 0.0961771653 -0.0379918401 0.0150638497 0.0188636269 -0.0408137729 0.0493765249 0.0210407755 -0.0179229322 0.0060918414 -0.1226903573 0.0024241045 0.0232770046 0.0052336280 -0.0107232296 0.0017206140 -0.0166435625 0.0219754978 -0.0070270364 0.0175385390 0.0313392427 -0.0146618870 -0.0017577462 -0.0277088311 0.0409648738 -0.0151173520 -0.0280132551 -0.0053769305 0.0045704183 0.0135404686 -0.0025694610 0.0202448423 0.0244234890 0.0050138717 -0.0853301283 -0.0206775027 -0.0996963141 -0.0642059110 0.0408998627 -0.0264269461 -0.0423938898 -0.0404877107 -0.0186782049 0.2458373474 -0.0136015245 0.1821411524 -0.2820126926 -0.1451774419 0.2075191989 -0.0965807769 0.1621778987 -0.5149454140 0.0348293682 -0.0344433128 -0.0822090128 -0.1181000558 -0.1098847300 0.0567857237 -0.0158580311 -0.0066409953 0.0049481655 -0.0197802280 -0.0017107620 0.0118598264 0.0258854222 -0.0022115864 -0.0099451817 -0.0015107967 0.0155909592 0.0066653463 0.0261962462 -0.0096294567 -0.0208969642 0.0013254449 0.0360765455 0.0125152537 -0.0019452825 0.0254687799 -0.0555206214 -0.0758291152 0.0478479772 0.0642641855 0.0299587437 -0.1489154173 -0.0741932382 -0.0052841843 -0.0009309211 0.0043007181 0.0100194825 -0.0008385847 0.0058893592 0.0120469252 0.0038913482 -0.0904505241 -0.0170007780 -0.0015529132 0.0037847461 -0.0204008346 -0.0127712671 0.0068474924 -0.0025830154 0.0308102450 0.0067141791 0.0255711465 -0.0175452383 -0.0109596073 0.0060826587 0.0180285477 -0.0009346493 0.0226364773 -0.0038203399 -0.0102391297 -0.0908182888 0.0888605638 0.0445814742 0.0149002999 -0.1316338391 -0.0484671989 -0.0366019426 0.0495975902 0.0277840904 0.0223878406 -0.0676117606 -0.0191689800 -0.1570448969 -0.0962970790 0.0521317006 -0.0222426433 -0.0049990194 0.0063001771 0.0931028592 -0.0062018581 -0.2868595698 0.0330688507 0.0204639756 0.0056889314 -0.0056065692 0.0020997185 -0.0156891783 0.0021284332 -0.0073049471 -0.0023645583 0.0032711878 0.0032227049 -0.0000999841 0.0002916412 0.0031730018 0.0029348496 0.0056228102 -0.0113657055 -0.0063022805 -0.0021162224 -0.0028710253 -0.0021021449 -0.0010867703 -0.0006947272 -0.0018210568 -0.0040625515 0.0074889079 0.0052881650 -0.0010677575 -0.0065931530 -0.0030218724 -0.0116025297 0.0069582093 -0.0254352791 -0.0210116555 0.0356552694 0.0192008305 -0.0157264729 0.0408198011 0.0230775002 0.0280025928 0.0211708743 0.0242677784 -0.0064136161 0.0035127935 -0.0124711407 0.0066766516 -0.0086885903 -0.0010749133 0.0001008441 0.0005510060 0.0004312249 0.0023602197 -0.0067485877 -0.0067146077 0.0003871254 -0.0060442258 -0.0040017414 0.0012944347 -0.0039806008 0.0000336442 0.0014829785 0.0059411089 0.0038346809 -0.0005340133 -0.0005154739 -0.0024445572 0.0291649231 -0.0147007986 -0.0029999803 -0.0093470234 -0.0156895066 0.0119751724 -0.0131087213 0.0055689414 -0.0127456228 -0.0017229783 0.0012571910 -0.0016650998 -0.0087545222 0.0112113383 0.0127376059 0.0069276024 0.0046509655 -0.0002444140 0.0085018759 0.1192716610 -0.1369816532 -0.0006012750 -0.0584020262 0.0030612903 0.0002055635 -0.0003691830 -0.0017493698 -0.0230419159 0.0195601405 0.0010195871 -0.0306186488 0.0206521343 0.0339159070 0.0016491833 0.0031090213 0.0037344063 -0.0228899223 -0.0067640308 0.0085702018 0.0216240421 0.0096538928 0.0043407483 -0.0026186020 -0.0009080244 -0.0104997799 -0.0058205009 -0.0052611343 0.0028686001 -0.0090630660 -0.0200149403 0.0148764785 -0.0719691826 -0.0660770280 -0.0645578796 -0.0054091475 -0.0046711613 -0.0011395563 0.0167228825 -0.0187326180 -0.0060325842 -0.0773309944 -0.0471707587 -0.0917374516 0.0001506159 -0.0027156399 -0.0035372701 0.0029934190 0.0015855854 0.0045466816 0.0003055265 0.0003206396 -0.0014767671 -0.0019874490 0.0012199834 0.0013660917 0.0047216675 0.0177007871 -0.0080615952 0.0016886148 0.0195893282 -0.0073847531 -0.0004735373 -0.0275713815 0.0104309075 0.0011565500 0.0097259601 -0.0040710036 0.0104575788 -0.0301405911 0.0124167800 -0.0434236063 0.0918164411 -0.0276946793 -0.0027394797 -0.0218507464 0.0085418170 -0.0008535252 0.0060342425 -0.0021382639 -0.0088402747 -0.0211380702 0.0127417394 0.0230713909 0.0401768352 -0.0173397541 -0.0048167051 -0.0197020772 0.0083013409 -0.0020305691 -0.0178847521 0.0108667534 0.0043655583 0.0221587811 -0.0111563187 -0.0031349906 -0.0084979021 0.0025479550 0.0023238590 0.0242950832 -0.0099526843 0.0101511117 -0.0449114353 0.0430200604 0.0074079600 0.0291426311 -0.0121066269 -0.0022426912 -0.0085427577 0.0044141751 0.0269012566 0.0379030627 0.0053815530 -0.0457212257 -0.0973186833 0.0057845017 0.0048141789 -0.0032107296 0.0081078577 0.0048033160 0.0260665700 -0.0146252489 0.0102871585 0.0164464754 -0.0228289919 -0.0218854961 -0.0202990215 0.0005750954 0.0024691681 -0.0033563040 0.0122965301 0.0534331579 -0.0116384592 -0.0260459394 -0.0295001422 0.0015250559 -0.0174058607 -0.0179832509 0.0257588895 -0.0226720537 -0.0005806885 0.0005874771 -0.0001118452 0.0035432082 -0.0000771462 -0.0006707669 -0.0001557566 0.0003093965 -0.0000230541 0.0005384388 -0.0005592069 0.0001400668 -0.0007549427 -0.0009540786 0.0004162388 -0.0001392449 0.0009701174 -0.0016927654 0.0004741312 0.0007736263 0.0002209350 -0.0001702733 -0.0003181460 0.0000477143 -0.0005263559 -0.0008906784 -0.0002350300 0.0029803889 0.0004834616 0.0027989617 0.0024480502 -0.0014754303 0.0010811887 0.0016496367 0.0016468376 0.0007341414 -0.0090830247 0.0004491688 -0.0071284871 0.0107256964 0.0056183790 -0.0080639800 0.0035765862 -0.0065445707 0.0207925710 0.0518995228 -0.0339426042 -0.0877009982 0.0178149599 0.0115791553 -0.0062423523 0.0018912124 -0.0017564827 -0.0019613083 0.0039051383 -0.0095178095 -0.0068316104 -0.0077726855 0.0027507442 0.0060380676 0.0021682387 0.0021185619 -0.0008838096 -0.0017120202 0.0047359413 0.0033424535 0.0027355528 -0.0050070823 -0.0037159475 -0.0087723909 0.0161650600 0.0112394594 0.0062802709 0.0003142000 -0.0023925040 -0.0044083093 0.0498383447 0.0165661427 0.0115420226 0.0031688274 -0.0082782313 -0.0066807776 0.0063272047 0.0159419111 -0.0088009697 0.0133785170 -0.0621790100 -0.0515156171 -0.0088680671 0.0200402461 -0.0714486330 -0.0342614774 0.0253355158 -0.0092456606 0.1057599842 0.0174651707 0.0777241890 -0.0603191410 -0.0381597662 0.0339620839 0.0600721579 -0.0074130751 0.0677740742 -0.0224435580 -0.0310911991 -0.3048332836 0.3033388986 0.1764754493 0.0585720943 -0.3910757333 -0.1228140868 -0.0510562618 0.1276324126 0.0499979614 0.0622588366 -0.3054823399 -0.0741211213 -0.5274177601 -0.3131945592 0.1793626902 0.0018684568 0.0008587389 0.0009555165 -0.0036711316 0.0121651535 -0.0163802270 -0.0013475458 -0.0006418353 0.0003282200 0.0046070758 -0.0113614487 0.0181895515 0.0011133552 0.0012548338 -0.0008719436 -0.0014254439 -0.0005673384 0.0000169315 -0.0002287298 -0.0005548730 0.0002699679 -0.0001205759 0.0011057085 -0.0000209293 0.0002116242 0.0004710911 -0.0007801508 0.0002202321 0.0003858657 0.0000835595 0.0009971338 -0.0038063240 -0.0020581796 0.0006722783 0.0036643656 0.0012988931 -0.0000182704 -0.0008634373 0.0015492551 0.0017363559 -0.0033960902 -0.0002512995 0.0000473976 -0.0016912570 -0.0019597838 -0.0028146955 -0.0012438244 0.0027746522 0.0015504854 -0.0029341261 0.0016511885 -0.0007842361 0.0018957449 -0.0016533264 -0.0003048675 -0.0002399021 -0.0002671653 0.0000276402 0.0005181491 0.0012523504 0.0002946814 -0.0012392039 -0.0005590628 -0.0002992142 0.0055217540 0.0031708625 0.0001300121 -0.0055190157 0.0010288712 -0.0027256711 0.0021251912 0.0043134737 -0.0008639760 0.0001573382 0.0001523756 0.0001098269 0.0025225937 0.0013176505 0.0005581961 0.0002085893 0.0007503813 0.0053346098 -0.0019470360 -0.0003691135 -0.0005309449 -0.0005583878 -0.0003983285 -0.0009288047 -0.0012482585 -0.0019653849 0.0015968395 -0.0035326878 0.0091253862 -0.0081993245 0.0079946640 0.0067239872 -0.0016036326 0.0007426396 -0.0009415195 -0.0143323600 0.0012503251 -0.0075825004 0.0041701175 -0.0065079413 -0.0051204898 -0.0007489573 -0.0004980550 -0.0003939916 0.0016361735 0.0004322015 -0.0003236593 -0.0013311345 -0.0005539696 -0.0001982925 -0.0003598133 -0.0004513076 -0.0002712511 0.0011801154 0.0006500281 -0.0004225634 -0.0055686903 -0.0021572139 0.0003867926 0.0072909313 0.0074154846 0.0081910246 0.0003928541 0.0001526633 -0.0000118914 -0.0063730943 -0.0017847664 0.0006540276 0.0063717037 0.0040485970 0.0063130882 -0.0001607483 0.0002297827 0.0009164371 0.0000355222 -0.0003629431 0.0002146598 -0.0000445255 0.0001349936 0.0002102582 0.0001515393 -0.0000913821 -0.0001885503 -0.0001067661 -0.0005258446 0.0002057995 0.0000034376 -0.0005284339 0.0002080488 -0.0000458291 0.0008097711 -0.0002826039 -0.0000230630 -0.0002826624 0.0001159177 -0.0007265778 0.0008891043 -0.0003734843 0.0013958001 -0.0028692671 0.0008880095 0.0000764556 0.0006151325 -0.0002707350 -0.0000015385 -0.0001803638 0.0000845037 0.0003409264 0.0006829378 -0.0001482002 -0.0007516702 -0.0012803716 0.0004462556 0.0001917538 0.0004535355 -0.0000711234 0.0000967715 0.0005008319 -0.0002261885 -0.0001046635 -0.0005359922 0.0002719061 0.0000322122 0.0001282962 -0.0000757492 -0.0003041202 -0.0007322370 -0.0001181678 -0.0002602008 0.0008043938 -0.0007616862 -0.0001890293 -0.0006820453 0.0002518160 0.0000584588 0.0002537104 -0.0001405675 -0.0007535576 -0.0009229404 -0.0002276172 0.0012770479 0.0027553907 -0.0001784166 -0.0070396465 0.0068492939 -0.0092367493 0.0062255472 -0.0250919926 0.0158592075 -0.0162482223 -0.0221087407 0.0225431651 0.0624213249 0.0356427720 -0.0006235954 -0.0006694672 0.0068070682 -0.0099429337 -0.0468350631 0.0087562874 0.0237238383 0.0377234879 -0.0138185254 0.0061997882 0.0056705078 -0.0162255115 0.0201032143 -0.0003988728 -0.0038394651 -0.0152778222 -0.0187321959 -0.0105690548 -0.0222337988 -0.0029330598 -0.0003230687 0.0056258678 -0.0002593377 -0.0019925462 0.0008750507 0.0008870420 -0.0007369778 0.0028482452 0.0008606135 0.0005834276 0.0006337449 0.0003376428 0.0010748692 -0.0002947286 -0.0002867933 -0.0006901132 0.0001624076 -0.0001986675 -0.0000702402 -0.0000335276 0.0004910802 -0.0001283022 0.0014596261 -0.0002072375 -0.0000915396 -0.0004095290 0.0000130181 0.0002412290 -0.0008286055 0.0002769094 0.0002417484 0.0005890444 -0.0007130777 -0.0006165776 0.0008067399 -0.0006109413 0.0007722557 -0.0030738247 0.0003673108 0.0011975929 0.0006103793 0.0106316750 0.0089676025 -0.0033218219 0.0009235745 0.0006139645 -0.0004103088 0.0025316613 -0.0001820828 -0.0014390077 -0.0041274496 -0.0013711724 0.0020925909 0.0014066955 0.0003611566 -0.0009300107 -0.0030702703 0.0001753838 0.0021328348 0.0025348013 0.0005495348 -0.0024002059 -0.0042515094 -0.0034688908 0.0018340019 0.0113494217 -0.0038545798 -0.0069123860 -0.0035657003 0.0059425086 0.0040894349 -0.0000877657 0.0013382459 0.0002992259 -0.0008039301 -0.0006446082 0.0010592342 -0.0025176745 0.0008087091 -0.0011403096 -0.0008023698 0.0002801523 0.0001637886 -0.0007943777 -0.0003934235 0.0003732916 -0.0002154397 0.0007864018 0.0002566277 0.0010891894 -0.0001337080 -0.0002937085 0.0001331842 0.0000258716 -0.0003440302 0.0009471049 -0.0001519228 -0.0004208789 -0.0030593036 0.0026418024 0.0013633267 0.0004810426 0.0005719156 -0.0015249097 0.0028869143 -0.0012735384 0.0011200127 0.0010065147 -0.0022130354 -0.0005557614 -0.0059944406 -0.0033785411 0.0015077014 -0.0000506066 -0.0024917406 -0.0012719690 0.0018622340 0.0122196878 0.0363106864 -0.0001141565 -0.0003369250 -0.0004577285 0.0000957943 -0.0003165761 0.0003151657 -0.0001928626 -0.0005871304 -0.0002717112 -0.0001063735 0.0000620436 0.0000195726 0.0003188553 0.0002938823 0.0000260948 -0.0001869431 -0.0000901321 -0.0000913068 -0.0003609503 -0.0003956189 0.0004081418 -0.0001864895 -0.0000776826 -0.0000015578 -0.0000364264 -0.0000651728 -0.0000204584 0.0001856130 0.0002037748 0.0000052686 0.0005742934 -0.0002994221 0.0002458482 -0.0004766875 0.0006153737 0.0000538777 0.0007746652 -0.0004226259 0.0000874652 0.0000872644 -0.0002025583 -0.0015147217 -0.0006608285 -0.0005321394 -0.0011353339 0.0027642220 0.0021788739 -0.0025854273 -0.0002524014 -0.0003238158 -0.0005662227 0.0003357497 -0.0010091223 -0.0002869558 0.0009102698 0.0003323888 0.0003782108 -0.0006149609 0.0007792965 0.0005216238 0.0000004879 -0.0008645580 -0.0003135643 -0.0004809661 0.0000819867 0.0006407054 0.0122182574 0.0229642588 0.0328040403 0.0460193382 -0.0467728506 -0.0257606118 -0.0575244448 0.0024804813 -0.0330139609 -0.0163965963 0.0139250735 0.0150274212 0.0539465853 -0.0314290824 -0.0180258445 -0.0627837610 0.0181133924 -0.0041103620 0.3162091717 -0.0573008943 0.0667382607 -0.3174626396 0.2156443110 0.1334421259 0.0063115578 -0.0001140738 0.0026836891 0.6132224573 -0.0933884259 0.2437069249 -0.3595909448 0.3236995488 0.1573604597 0.0003289953 0.0001944276 0.0000450772 -0.0003536433 -0.0001420953 0.0000004121 0.0005265223 0.0002245551 0.0000173288 0.0003293934 0.0003615947 0.0004943535 -0.0006949211 -0.0002595895 0.0003461813 0.0036555707 0.0014992642 -0.0006368350 -0.0026006646 -0.0024570626 -0.0032903224 -0.0001289422 -0.0001312251 -0.0000394995 0.0036031643 0.0014245314 -0.0000946032 -0.0020821864 -0.0013242056 -0.0013810800 -0.0005222812 -0.0051018588 -0.0091542379 0.0008689576 0.0004477057 0.0014332132 -0.0000377473 0.0000262795 -0.0000073849 -0.0000575861 0.0000234862 0.0000174004 -0.0012953040 0.0006475070 -0.0000942393 0.0000636076 -0.0007961001 -0.0000291183 -0.0003137421 0.0009158849 -0.0000458854 0.0010503644 -0.0007786415 0.0000017831 -0.0011782215 0.0005835924 -0.0012151903 0.0040018288 -0.0057960406 0.0021042627 0.0000705258 0.0000763409 0.0001565999 0.0000933319 0.0003397165 -0.0001249791 0.0020863903 -0.0004741717 -0.0010040724 -0.0002659596 -0.0002364264 -0.0003230623 -0.0002282882 0.0014065782 -0.0013972754 -0.0001688103 0.0007276883 -0.0009215702 -0.0000940767 -0.0013086441 0.0008202740 0.0003103953 0.0006145692 0.0000038740 0.0016058780 -0.0004326544 0.0032852590 -0.0004755145 0.0032394471 -0.0032081804 -0.0003323621 -0.0017378465 0.0009219691 0.0001157544 0.0005227383 -0.0003039957 -0.0008346668 -0.0020430757 0.0004281284 0.0024350521 0.0053039051 -0.0003740471 -0.0002312008 0.0003863315 -0.0000763594 0.0010001427 -0.0000811174 0.0002511673 -0.0009176200 -0.0011547812 0.0003552870 0.0015820677 0.0005338994 -0.0002926135 0.0001891361 0.0004367593 -0.0002058959 -0.0016970598 -0.0004091530 0.0008099884 0.0014490889 -0.0010970371 -0.0007030518 -0.0013065852 -0.0001660980 0.0009655898 -0.0000042705 0.0001158477 0.0000327200 0.0004541104 0.0010310669 -0.0000142582 -0.0003143679 0.0008916502 -0.0003835553 0.0002514585 -0.0011317817 0.0007794200 0.0019543258 -0.0005594566 0.0000247931 0.0005508202 0.0023299136 0.0000107802 -0.0010694797 0.0017430314 -0.0021851597 -0.0052814394 0.0054355495 -0.0030615222 0.0109777665 -0.0059570653 -0.0022983476 -0.0059322303 -0.0239313777 -0.0522835656 -0.0012048415 -0.0002312355 0.0001407490 -0.0019461075 -0.0010830834 -0.0003799711 0.0058106570 0.0001659117 0.0035519700 -0.0070410904 -0.0037023253 0.0052251124 -0.0015951627 0.0031662353 -0.0116944875 -0.0151904038 0.0208537259 0.0356017674 0.1213073503 0.0871565634 -0.0266361311 0.0128874425 0.0050882201 -0.0079530251 0.0206164101 -0.0011266228 -0.0149361248 -0.0279563944 -0.0141398495 0.0127796833 0.0093974381 0.0009955488 -0.0058933538 -0.0277596773 0.0032010494 0.0191118967 0.0158242442 0.0017380661 -0.0088997329 -0.0300987815 -0.0798924342 -0.0143724113 0.0803069670 -0.0288122644 -0.0597530196 -0.0287681318 0.0756123788 0.0506523997 0.0014852563 0.0067601266 0.0014460535 -0.0067747719 -0.0011543193 0.0009477834 -0.0054379812 -0.0053516376 0.0413761689 -0.0023406317 0.0037902902 0.0018027671 -0.0003284183 0.0024111146 0.0005200843 0.0009164952 -0.0011694656 -0.0006749093 -0.0005601004 0.0004025859 0.0002385208 0.0011515953 -0.0018739192 -0.0007846715 -0.0000356894 -0.0014464072 -0.0001664757 0.0103832665 -0.0069837583 -0.0048824813 -0.0003257054 0.0043180647 0.0016209031 0.0095938041 -0.0074512621 -0.0052661673 -0.0005594825 -0.0103864723 -0.0014821929 0.0041677520 0.0052847367 -0.0008350358 -0.0066907540 -0.0073943190 0.0006740264 -0.0039807800 0.0113717321 0.0228231776 -0.0129302747 0.0032881323 0.0372644464 0.0001123075 0.0051484838 -0.0062487625 0.0001150343 -0.0000575459 0.0007597012 -0.0005512484 -0.0006154261 -0.0003668831 -0.0000206039 0.0001339249 0.0000781458 -0.0000218148 -0.0003152227 -0.0001058502 0.0000387866 -0.0000802954 -0.0002844932 0.0000836222 -0.0000718709 -0.0000361357 0.0002453706 -0.0009840110 -0.0008535666 0.0000113331 0.0009313916 0.0005354905 0.0015985302 0.0017013561 -0.0014076160 0.0000757496 -0.0007653804 0.0001911781 0.0003375305 0.0022157329 0.0020570983 0.0006102305 0.0005866861 0.0022951759 -0.0001158486 0.0004373094 -0.0000473717 0.0002044697 -0.0006661391 0.0001631519 -0.0000511229 -0.0002167277 -0.0001290998 -0.0000931667 0.0002383544 0.0002154923 -0.0001208668 0.0000702829 -0.0000232631 -0.0000803447 0.0005159822 0.0000390535 -0.0001703399 0.0000952773 0.0000581500 0.0000453267 0.0004938995 0.0004256608 -0.0002819784 0.0003205560 -0.0003251439 -0.0003586155 -0.0002806714 0.0003583818 0.0002930969 0.0001171024 -0.0001532560 -0.0009542654 0.0002995695 0.0000305610 -0.0000493525 0.0001781510 0.0001559982 0.0003519333 0.0000157421 0.0001804889 -0.0000750341 0.0025781272 -0.0028593525 0.0033463978 -0.0046241296 -0.0012286497 0.0002123623 -0.0001234152 -0.0000103461 0.0010489431 0.0000242628 0.0007749609 0.0011613599 -0.0008775909 -0.0002108051 -0.0403988545 -0.0313413207 -0.0373984014 0.0555965163 0.0250987092 -0.0075752702 -0.0095251035 0.0008680231 0.0148754586 -0.0346749290 -0.0358398909 -0.0421538904 0.0573887430 0.0335538253 -0.0063083369 -0.3980327626 -0.1710110216 0.0320359465 0.3065784946 0.2425992920 0.3430521530 -0.0022177771 0.0037862670 0.0016718628 -0.4826866519 -0.1968909212 0.0493750939 0.2722177522 0.1876147468 0.2698510359 -0.0000028428 -0.0001351917 -0.0002573922 0.0001269030 0.0001540015 0.0002306079 0.0011383963 -0.0012969384 -0.0026049186 0.0038230417 -0.0015174394 -0.0039014830 -0.0004129916 -0.0010206609 0.0004939387 -0.0002801428 -0.0017134768 0.0006141421 -0.0001428577 0.0019211827 -0.0007499664 0.0001503013 -0.0005991700 0.0002289402 -0.0024660168 0.0023316316 -0.0002384071 0.0030424719 -0.0059272397 0.0017799651 0.0001573442 0.0015976133 -0.0004556425 0.0003049326 -0.0005680521 0.0000982300 0.0019157718 0.0009939416 -0.0020361489 -0.0022289962 -0.0040769543 0.0024523533 0.0001765549 -0.0001854206 -0.0003277729 -0.0002020212 -0.0018607851 0.0008427649 -0.0000821097 0.0012065981 -0.0008882758 0.0001546877 -0.0007939328 0.0008594133 0.0011075427 0.0017836129 0.0003963371 0.0011468315 -0.0035015140 0.0040166067 -0.0006038786 0.0007957547 -0.0009203079 0.0009674205 0.0009213554 0.0005545126 -0.0009759999 -0.0009986848 -0.0047584546 0.0010376402 0.0028464872 0.0009650519 0.0009548168 -0.0026298184 0.0028943704 -0.0031020384 0.0057727543 -0.0037303861 0.0031013689 0.0050829656 -0.0073443522 -0.0181405734 -0.0136830477 -0.0018337240 0.0011389471 -0.0018312898 0.0057007683 0.0245964018 -0.0121502596 -0.0149665420 -0.0170496531 0.0054641809 -0.0052601559 -0.0154542127 0.0117664331 -0.0091493781 0.0003537724 -0.0002281732 0.0007248293 -0.0021055189 0.0002631813 0.0016887658 0.0002770383 -0.0004972975 -0.0001251007 -0.0003500841 0.0005709455 -0.0002745690 0.0007374846 0.0014366342 -0.0006248802 0.0002508903 -0.0014402917 0.0016177010 0.0001000424 -0.0008691188 0.0005146414 0.0018154471 -0.0017401290 0.0011123661 -0.0033834952 0.0026003737 0.0010093004 -0.0001260620 0.0076285582 0.0158367814 -0.0020608811 0.0016504912 -0.0014488920 -0.0014667084 -0.0017608732 -0.0010414728 0.0080554918 0.0009202861 0.0044037041 -0.0114632830 -0.0065518951 0.0092676261 -0.0007765668 0.0038425019 -0.0180737902 -0.0665454046 0.0884445845 0.1334446986 0.4193234944 0.3319755581 -0.1318084356 0.0495261851 0.0188248060 -0.0249679702 0.0837336967 -0.0058801480 -0.0601631191 -0.1129246677 -0.0526593072 0.0498670222 0.0385650897 0.0041250534 -0.0266536664 -0.1083576354 0.0113199011 0.0744115011 0.0624886490 0.0053457182 -0.0366636559 -0.1095518993 -0.2959648093 -0.0282326907 0.3507047777 -0.1277637802 -0.2419421653 -0.1161102471 0.3118717842 0.1981648885 0.0067265748 0.0286231949 0.0038424333 -0.0247367554 -0.0071352614 0.0098546976 -0.0496434922 0.0045348196 0.1177232663 -0.0094148185 0.0124670128 0.0052166020 -0.0027660209 0.0084857781 0.0024446974 0.0027878679 -0.0026279000 -0.0015833138 -0.0001500288 0.0002135126 0.0000741965 0.0057218368 -0.0051378806 -0.0032273029 0.0004893217 -0.0059660519 -0.0009452068 0.0286615251 -0.0185675032 -0.0148633870 -0.0001493598 0.0123871619 0.0026027445 0.0362328302 -0.0249753079 -0.0192019406 -0.0016629739 -0.0451679627 -0.0067124431 0.0034001295 0.0127635102 0.0010211634 -0.0250672180 -0.0297305040 0.0025058908 -0.0214734268 0.0498753704 0.0998816254 0.0051831151 -0.0005201340 -0.0126641243 0.0010808652 0.0024310105 -0.0032584414 0.0000104873 -0.0006655967 0.0004692011 -0.0003365001 -0.0003839122 -0.0000793107 0.0000925191 0.0006782705 -0.0000924755 0.0003699992 -0.0007717125 -0.0001409984 -0.0000624083 -0.0004366543 -0.0009520270 -0.0000450645 -0.0003587076 0.0002376210 -0.0002265484 0.0009315322 0.0004762376 0.0002291390 -0.0007368122 -0.0006253358 -0.0009111916 -0.0004598844 -0.0007161497 -0.0013499765 0.0026209210 0.0011253854 -0.0001611726 0.0006654935 0.0006416908 0.0011462087 0.0011877948 0.0071773529 0.0000881397 0.0009034992 0.0041497111 -0.0002306287 -0.0018311271 0.0004552609 0.0002335945 -0.0003975319 -0.0010218114 -0.0000241158 -0.0001904380 -0.0010511040 -0.0001661818 0.0011533177 0.0007993827 -0.0007973854 0.0003883475 0.0004681717 0.0001615930 -0.0010958922 -0.0006815564 -0.0006675292 -0.0004294420 0.0002329417 0.0004497122 -0.0012927680 -0.0012112821 -0.0021054639 0.0014021804 0.0013058411 0.0020954679 0.0002208684 0.0005229394 -0.0005568274 -0.0001137495 -0.0004116401 -0.0026632425 0.0018567878 0.0012084131 0.0032171435 -0.0008127264 0.0002519523 -0.0126942038 0.0048011027 -0.0061095257 0.0133686171 -0.0146682213 -0.0043868432 0.0000357121 -0.0001852030 -0.0000059842 -0.0249653029 0.0043204065 -0.0090646453 0.0154878749 -0.0137420275 -0.0061695278 0.0153856211 0.0104198877 0.0098376249 -0.0207489332 -0.0089081550 0.0022756270 0.0098210705 0.0032001226 -0.0029716739 0.0124407342 0.0115117384 0.0147701266 -0.0225934002 -0.0117256559 0.0051925495 0.1484727714 0.0628899435 -0.0164438057 -0.1182323025 -0.0972062142 -0.1355443464 -0.0015088225 -0.0021538423 -0.0004179964 0.1483356095 0.0697949247 -0.0156503786 -0.0945222952 -0.0657130336 -0.0875918746 0.0000304714 0.0000189946 -0.0000176343 0.0000591442 0.0002041897 0.0001695837 -0.0007999538 0.0002134031 -0.0000601355 -0.0015468182 0.0007443952 0.0012043780 -0.0000231578 0.0005323942 -0.0001900167 -0.0001655170 0.0005706594 -0.0001587335 0.0001913702 -0.0008162720 0.0002502407 -0.0000880165 0.0003615587 -0.0001228010 0.0018404819 -0.0009681426 0.0002440418 -0.0018462437 0.0035834664 -0.0010750428 -0.0000087128 -0.0006084484 0.0001630514 -0.0000741546 0.0001074857 -0.0000111634 0.0004283319 -0.0005099843 0.0005249729 0.0004121644 0.0008120634 -0.0003827990 -0.0001493554 -0.0000103242 0.0000578506 0.0000385990 0.0003879150 -0.0002533065 0.0000424154 -0.0002926309 0.0002112713 -0.0000155599 0.0003358626 -0.0002716423 -0.0000192080 -0.0001751382 0.0004926331 -0.0004034378 0.0015867835 -0.0018333089 0.0002355998 -0.0001079199 0.0002682059 -0.0003246697 -0.0004358814 -0.0000804611 0.0004792106 0.0004960260 0.0014955806 -0.0009900327 -0.0022879913 -0.0001680402 0.0009072203 0.0000383661 0.0014805404 0.0021210888 0.0033511890 -0.0014050200 0.0000846717 0.0006347665 -0.0036389094 -0.0157563746 -0.0135454682 -0.0055220755 0.0002294461 -0.0011562495 0.0007766631 -0.0021071065 0.0003107524 0.0028336923 -0.0056247923 0.0009745550 -0.0029750774 0.0015426757 0.0030989992 -0.0046317424 0.0011941971 -0.0032357821 0.0052069428 0.0073394487 0.0020159129 0.0060572130 0.0041334604 -0.0011447143 -0.0018788855 -0.0028621145 0.0005551905 -0.0003026819 -0.0020137009 -0.0021529930 0.0009418515 0.0000572282 -0.0004888080 0.0005242285 0.0000028234 -0.0002021423 -0.0000421668 -0.0000997764 0.0001828453 -0.0003771256 0.0000529096 0.0000837656 0.0001193186 -0.0010876536 -0.0000719707 -0.0012502861 0.0007150568 -0.0005350660 0.0000386021 0.0038950616 0.0019845940 0.0000255720 -0.0029581206 -0.0006311674 -0.0003083359 0.0039858628 0.0021159176 -0.0031412399 0.0003011238 -0.0006784664 0.0040361511 -0.0025075050 0.0017854709 0.0054843401 -0.0023286518 -0.0018356463 0.0005610597 0.0000187025 0.0000001476 0.0000628832 -0.0004656453 -0.0006856785 -0.0004100141 0.0013041027 0.0004754465 -0.0009726735 -0.0000769236 -0.0003063717 -0.0000565907 0.0007283122 0.0004519508 -0.0003451688 -0.0019352019 -0.0021705758 0.0021565504 0.0025388530 -0.0050842173 -0.0014149579 0.0005470005 -0.0005377324 -0.0007198241 0.0008561351 0.0090371080 0.0030785771 0.0012079688 -0.0012278455 -0.0016275679 0.0007708683 0.0013346761 0.0002205854 -0.0036424571 0.0050999709 0.0003753594 -0.0000299387 -0.0013440197 0.0001334344 -0.0026782956 -0.0030738591 0.0010874473 -0.0017777106 0.0038893896 0.0013108366 0.0014187399 -0.0001967304 -0.0015748710 0.0015675578 0.0000533607 -0.0010657831 0.0020853403 -0.0002895112 -0.0009260179 -0.0200271244 0.0156370863 0.0110469795 0.0060443952 0.0157226564 0.0092350637 0.0239541919 -0.0131886880 -0.0069702064 0.0022242798 -0.0039339528 -0.0014248859 -0.0298401276 -0.0191236708 0.0082843916 -0.0000831621 0.0031635931 0.0014260471 -0.0043829559 -0.0182753774 -0.0317447797 0.0004772110 0.0003813331 0.0000602607 0.0002003189 -0.0004756839 0.0017010747 -0.0006860028 0.0005007443 0.0003960497 -0.0003095558 -0.0000721760 -0.0000807363 0.0004634018 -0.0003900312 0.0000516748 -0.0003139754 0.0004649541 0.0000020402 -0.0004868955 -0.0000522347 0.0003663186 -0.0002498212 0.0002909671 -0.0000416727 0.0003411096 -0.0005247706 -0.0002940229 0.0003098021 0.0005440928 -0.0000713200 -0.0005724376 -0.0001073631 0.0005947897 -0.0000961642 0.0000589489 -0.0002323147 0.0006914755 -0.0014661484 -0.0010271649 0.0041172103 0.0025302502 -0.0058545339 -0.0009236218 0.0008832863 -0.0005654592 0.0011541243 0.0003455246 -0.0004154262 0.0001907368 0.0007285565 0.0003894783 0.0001715217 -0.0005110614 0.0002687983 0.0011138311 -0.0010978031 -0.0003269477 -0.0007100507 0.0014972994 0.0009278014 0.0000577961 -0.0023001358 -0.0005616851 -0.0003945181 -0.0015333936 0.0005546347 -0.0113849046 -0.0000661574 -0.0130558388 -0.0050142538 -0.0629849396 -0.0673332847 0.0063507628 -0.0186018100 -0.0235737918 -0.2644709854 0.0870465000 0.0174016878 -0.0051420707 0.0401480807 0.0256696029 0.0763535098 0.0326977014 0.0834415873 -0.1330060065 -0.0494087016 -0.1369164767 0.4899034669 -0.4706560381 -0.3386046221 0.0567938065 -0.0170780881 -0.0065764201 0.4210346125 -0.0063444239 0.2467831513 0.1172933239 0.0187219393 0.0625980685 0.0002782179 0.0000856130 0.0000257067 -0.0003998750 -0.0001706856 -0.0000112555 0.0003960842 0.0002209116 0.0001306148 0.0000409989 0.0000078841 0.0000235467 -0.0002354190 -0.0001557453 0.0000924587 0.0007867560 0.0004929914 -0.0001189783 -0.0019742904 -0.0016971839 -0.0022738380 -0.0001268157 -0.0000201212 -0.0000209123 -0.0001549884 0.0003493905 -0.0000583035 -0.0012061824 -0.0004976685 -0.0010725159 0.0043942709 -0.0413773830 -0.0639752716 0.0389000052 0.0300576984 0.0605201960 -0.0000010157 -0.0000399749 -0.0000353956 -0.0000174673 0.0000003511 0.0000312313 0.0024690559 0.0042176841 -0.0015825393 -0.0044034504 0.0040650491 -0.0007581907 0.0027041746 -0.0065692327 0.0019188463 -0.0025179909 0.0033597311 -0.0009384886 0.0277399282 -0.0088676117 -0.0001828958 -0.0225361950 0.0405633536 -0.0117958260 -0.0019459641 -0.0062377361 0.0024614621 0.0012462148 0.0010918195 -0.0005921382 -0.0081737068 -0.0052462895 0.0058531371 0.0137517868 0.0185513150 -0.0095931037 0.0001411923 0.0000018956 0.0000803115 -0.0000911273 -0.0000474401 -0.0000290268 0.0000761419 -0.0000212948 -0.0001195826 -0.0000430509 -0.0000485791 0.0000173545 -0.0012523681 0.0000182842 -0.0004810773 0.0002302228 -0.0005080188 0.0003832067 0.0000055623 0.0000371898 -0.0000432770 0.0000615186 0.0000265901 0.0000905107 0.0000415908 0.0000174899 -0.0000878501 0.0002396528 0.0003324029 0.0000581069 -0.0004418074 0.0004295420 -0.0007478022 -0.0001348637 -0.0021692771 0.0012838362 -0.0011160732 -0.0017233520 0.0018596469 0.0040480649 0.0026369495 0.0001247680 0.0000682032 0.0002699035 -0.0013084880 -0.0049741495 0.0012319175 0.0026956184 0.0031482213 -0.0004996488 0.0013091230 0.0024551675 -0.0025722117 0.0019454720 0.0008450842 -0.0002346554 0.0000749939 -0.0045362237 0.0023282218 -0.0002688314 -0.0013323556 0.0019338141 -0.0006446524 0.0005708984 0.0006836094 -0.0004067459 0.0008156910 0.0002724793 -0.0001275608 -0.0002533643 0.0030617915 -0.0011741640 -0.0002932762 0.0022421769 -0.0029048939 0.0037009312 0.0022337925 0.0013724550 -0.0005654384 0.0007642221 -0.0019524988 0.0043243933 0.0046474096 0.0056790060 0.0003518643 -0.0003443579 0.0017154030 -0.0015192433 -0.0007627753 -0.0001473053 0.0030375171 -0.0002642632 0.0021244178 -0.0034631949 -0.0015414926 0.0021813478 -0.0016418784 0.0019662897 -0.0058623710 -0.0037412183 0.0059913932 0.0091372686 -0.0395166553 -0.0265865130 0.0029109430 -0.0015516273 -0.0022753021 0.0010209345 0.0057122625 -0.0012650927 -0.0042884842 -0.0057067866 0.0005398858 0.0033306610 0.0053252512 -0.0004872169 -0.0033304360 -0.0039299699 0.0015073782 0.0027808314 0.0022490938 -0.0004591148 -0.0017461990 -0.0052087761 0.0270429125 0.0164579558 0.0549065764 -0.0201710576 -0.0476207403 -0.0043054720 0.0361793489 0.0169724329 0.0004305714 0.0025329243 0.0006946757 -0.0017598059 -0.0007397649 0.0001899682 -0.0011253309 -0.0019898097 0.0088605575 -0.0011906032 0.0015559779 0.0007370582 -0.0001432267 0.0004611369 0.0001350669 0.0002830225 -0.0001080788 -0.0001110879 0.0000163397 0.0001969220 -0.0000157574 0.0001624518 -0.0007111082 -0.0001781766 0.0004304764 -0.0002555557 -0.0002339461 0.0035324649 -0.0020891455 -0.0019343443 0.0000766453 0.0002108908 0.0003156332 0.0016567729 -0.0017318241 -0.0009876429 0.0003762922 -0.0027134395 -0.0004852495 0.0004606578 0.0008321092 -0.0000232240 -0.0007180761 -0.0012973090 0.0002046506 -0.0013680293 0.0029812546 0.0004484046 -0.0050639007 -0.0068483861 -0.0032023595 0.0007103027 0.0033061052 -0.0034185438 -0.0003940013 -0.0005639047 0.0003085362 -0.0005483498 -0.0003994427 -0.0002970238 0.0003929317 0.0000632050 0.0001309008 0.0004682419 -0.0011602084 0.0001340069 -0.0002595155 0.0000426674 -0.0000759666 -0.0001664001 0.0000643821 -0.0001466435 0.0001917281 -0.0011828985 -0.0008167415 0.0004370015 0.0012455504 0.0004068210 -0.0014257371 0.0038335826 -0.0040113201 -0.0020207446 0.0047573456 0.0000770662 -0.0027813809 0.0043822377 0.0027627156 0.0010826626 0.0009196002 -0.0003290494 -0.0001573124 -0.0001350951 0.0003084099 0.0004766588 -0.0003608544 -0.0000006596 0.0001290065 0.0005107360 0.0007334782 0.0001351884 -0.0004881266 -0.0001912976 0.0002323039 -0.0002197997 -0.0001692199 -0.0011454901 0.0020731320 0.0011164767 -0.0001587485 -0.0021879959 -0.0008175324 -0.0008838562 0.0006153811 0.0015747253 0.0018299617 -0.0009003464 -0.0001400810 0.0000613979 -0.0005474660 -0.0003365766 -0.0007487329 -0.0001250043 -0.0005288675 -0.0009014236 0.0003346561 0.0000420813 -0.0003279206 0.0006825478 0.0005959063 0.0004764887 0.0002722166 0.0004692627 -0.0026156418 0.0007805684 -0.0029350104 0.0007484262 -0.0015913861 -0.0016111416 0.0001387416 -0.0000945824 -0.0000512615 0.0009757759 0.0005784994 0.0013438465 -0.0022312938 0.0030226318 0.0022450136 -0.0117350686 0.0253058532 0.0889270281 -0.0114621546 -0.0032812974 0.0345693459 -0.2040803829 -0.1107826430 -0.0749785694 0.0157391870 0.0001656824 -0.0312925176 0.0545678054 0.0058352917 -0.0716869830 -0.0991145159 -0.0317693873 0.1226628119 0.2787550743 0.2977113916 0.4779072998 0.0422179771 0.0225465292 0.0168011907 0.5969244616 0.2228895119 -0.1715745674 -0.0107880929 -0.0446245653 -0.1702405302 0.0000246589 -0.0002336385 -0.0003740046 0.0002506905 0.0001731183 0.0003690427 -0.0141463841 0.0298689708 0.0604710854 0.0495258847 -0.0118613429 -0.0481259052 -0.0016009843 -0.0027736161 0.0012810223 0.0007019023 -0.0033889785 0.0013968178 -0.0015653543 0.0045451535 -0.0014948948 0.0011370241 -0.0021373211 0.0006909225 -0.0177761436 0.0062574431 0.0004413089 0.0139070675 -0.0260902242 0.0073718351 0.0016685580 0.0040239840 -0.0015576314 -0.0002420453 -0.0010796981 0.0003619562 0.0102342482 0.0025051720 -0.0053700432 -0.0084622599 -0.0125219720 0.0067851174 -0.0033761860 -0.0052018236 -0.0010373666 -0.0002021057 -0.0041427910 0.0046932918 -0.0004403389 0.0063244961 -0.0054839116 0.0003317641 -0.0014761316 0.0017252999 -0.0072737065 0.0025700024 -0.0167800094 0.0055993035 -0.0194425816 0.0242134696 0.0040994842 0.0081230054 -0.0006733852 -0.0026899576 -0.0043210272 -0.0004219953 0.0264482081 0.0189516880 0.0270474734 -0.0273104601 -0.0545572526 0.0008275318 -0.0001276903 -0.0014278615 0.0015992312 -0.0013770394 0.0020383943 -0.0011162622 0.0008635291 0.0021232750 -0.0031679701 -0.0082857409 -0.0073766048 -0.0013518263 0.0011860544 -0.0005675118 0.0040490958 0.0174439181 -0.0111127858 -0.0116125349 -0.0099197580 0.0039665186 -0.0024265491 -0.0155540413 0.0088246374 -0.0058290691 0.0142147844 -0.0004286858 0.0001165495 -0.0914486286 0.0329329186 -0.0003311892 -0.0248611831 0.0251866443 -0.0077549307 0.0054125029 0.0235002079 -0.0120176166 0.0006218698 0.0095714077 -0.0023415453 0.0033878448 0.0120426879 -0.0065912223 -0.0012042233 0.0229711421 -0.0228758840 0.0195910240 0.0246098513 0.0043929487 -0.0086677429 -0.0060311974 -0.0084792785 0.0534962420 0.0376745258 0.0383406409 0.0083567390 -0.0043953958 0.0097488873 -0.0097998147 -0.0063895425 0.0004683341 -0.0005633931 0.0018079250 0.0003196177 -0.0000570522 0.0002942863 0.0004676003 -0.0004450875 0.0004162015 0.0002443085 -0.0002102207 -0.0000801433 -0.0003917907 0.0022302346 0.0022733358 -0.0011280082 0.0001985317 0.0001915935 0.0000134525 -0.0003314538 0.0000448190 0.0002198516 0.0004612546 0.0000023994 -0.0003166271 -0.0004397274 -0.0000100312 0.0002221966 0.0002872308 -0.0001160269 -0.0002060938 -0.0003446139 -0.0001677689 0.0002388438 0.0006657699 -0.0024914742 -0.0010791888 -0.0036016803 0.0012324798 0.0033748735 0.0002731212 -0.0017493226 -0.0009642574 0.0000998350 -0.0002106802 -0.0000961939 0.0000315164 0.0001334467 -0.0001289790 0.0002234991 -0.0000350783 0.0002309472 0.0000965389 -0.0000732939 0.0000000444 -0.0000352208 -0.0000670537 0.0000124186 -0.0000717544 0.0000369332 0.0000089782 0.0000372357 0.0000105326 0.0000227603 0.0000018937 -0.0000072999 -0.0000381555 0.0000108525 0.0000249488 0.0000058712 -0.0003777266 0.0002415392 0.0002851570 -0.0001072033 0.0004403198 -0.0002691917 0.0005499186 -0.0003200060 -0.0000350396 0.0000054761 0.0003123783 -0.0000010175 -0.0006193139 -0.0003930045 0.0001093250 0.0001903653 0.0003295602 0.0000848995 -0.0004372446 -0.0019950883 -0.0017822221 -0.0342266598 -0.0221769910 -0.0117918414 0.0000415947 -0.0001516195 0.0001659416 0.0001162957 0.0001335920 0.0000025810 0.0000054167 -0.0000362347 0.0000015473 -0.0000511286 0.0000208103 -0.0000458087 -0.0001232043 0.0001561185 -0.0000087196 -0.0000237630 -0.0002039252 0.0001853975 0.0000387227 0.0000111018 0.0000339973 0.0000000305 0.0000117742 0.0000329186 -0.0000663641 -0.0000078172 -0.0000190852 0.0008438292 -0.0005490515 0.0007292408 0.0004410645 -0.0009134930 -0.0003149582 0.0004723994 -0.0006150652 -0.0003047129 0.0013706750 0.0006692146 -0.0010944531 -0.0003734498 0.0005659347 -0.0002224406 -0.0000016590 0.0004272271 -0.0003211894 -0.0001501446 -0.0002345106 -0.0002633760 0.0000629373 -0.0000540159 0.0000330732 -0.0000211750 0.0000456290 0.0000324052 0.0001761638 -0.0000341301 0.0000026922 0.0000286904 0.0002453182 0.0001988737 0.0001112750 -0.0001843497 -0.0001793767 0.0358600190 -0.0192849323 0.0008394217 0.0033276524 -0.0060917065 -0.0072494281 -0.0139542865 -0.0016391328 -0.0084552272 -0.0101778445 0.0038894396 0.0010331611 -0.0089676481 0.0120579141 0.0093664237 0.0095657785 0.0021653713 0.0059922881 -0.0384347240 -0.0068544720 -0.0237629731 -0.0198389528 0.0022057536 -0.0065546170 0.0024007870 -0.0008067763 -0.0002417839 -0.0286419911 0.0138274817 0.0029859644 -0.0204364686 0.0335106138 0.0264744015 -0.0004522222 -0.0039130385 -0.0125318369 0.0144102322 0.0047142203 -0.0092007652 0.0131861366 0.0072143580 0.0047512689 0.0048295610 0.0067399430 0.0164454393 -0.0097236981 -0.0016899266 0.0076546590 0.0611854135 0.0264251887 -0.0304426775 0.0097207350 -0.0035765809 -0.0201713505 -0.0030626602 -0.0016064809 -0.0012228985 -0.0069171753 0.0042448965 0.0205052476 0.0221316788 0.0244514614 0.0546961877 0.0007769080 -0.0019245468 -0.0027579212 0.0021081846 0.0010623542 0.0024192746 0.0005860921 -0.0022490204 -0.0042101011 -0.0037662106 0.0006185371 0.0031536339 -0.0197585716 -0.0419147967 0.0190439847 0.0244642919 -0.0418057497 0.0144480129 -0.0314461929 0.0635155804 -0.0192653309 0.0223507116 -0.0362310679 0.0110285702 -0.3454072108 0.0954329255 0.0191100489 0.2457917580 -0.4542343295 0.1303455047 0.0263476873 0.0583455276 -0.0238565194 -0.0055646064 -0.0111036102 0.0042835964 0.1279704532 0.0418242737 -0.0688733857 -0.1144742524 -0.1623444388 0.0873152187 -0.0212556510 -0.0418036308 0.0027558438 0.0079324786 -0.0291034976 0.0390204809 -0.0073072975 0.0476868499 -0.0464474254 0.0022062130 -0.0144218075 0.0143168364 -0.0859282763 0.0024889431 -0.1750940202 0.0462244437 -0.1707907875 0.2123674799 0.0306726432 0.0645540939 -0.0055380559 -0.0199633722 -0.0321433449 -0.0026490472 0.2074602353 0.1432727768 0.2003165492 -0.2108454726 -0.4233169687 0.0067323973 -0.0000245679 0.0000245177 -0.0000747810 -0.0000243453 -0.0002199082 0.0001123048 0.0000194206 0.0000503245 0.0001144974 0.0003194065 0.0002627353 0.0000264621 -0.0000737322 0.0000919024 -0.0002159569 -0.0010639927 0.0002668331 0.0005663016 0.0003452363 0.0000945997 0.0002701242 0.0005040492 -0.0006155109 0.0006338090 -0.0155522461 -0.0106886197 0.0044262944 0.1597753584 -0.0164430220 -0.0099835314 0.0220442093 -0.0043050280 -0.0008546785 0.0176781039 -0.0257535486 0.0076209042 0.0082715561 -0.0123845789 0.0043929936 0.0108843728 0.0106908605 0.0021727638 0.0175656780 0.0318745194 0.0082618542 0.0199755889 0.0109853177 0.0158701163 -0.0077659431 0.0067455760 -0.0193908934 0.1119193104 0.0536627192 0.1200519115 -0.0043939901 -0.0019481416 -0.0029278942 -0.0021535496 0.0023679002 -0.0008661146 -0.0001625110 -0.0000452602 -0.0002100684 0.0008460057 0.0003430230 -0.0004607618 0.0004447433 -0.0004911597 0.0008510041 0.0003777052 -0.0004680940 -0.0004418652 0.0043447304 0.0039316400 -0.0017358669 0.0003951515 0.0002970132 -0.0001063773 -0.0001985307 0.0000867822 0.0001911789 0.0001617672 -0.0001619365 -0.0001849975 -0.0004806139 0.0000980306 0.0003297371 0.0000739125 -0.0001381088 -0.0001042269 0.0000046738 0.0001510342 0.0000024912 0.0003097205 -0.0033040048 -0.0012732341 -0.0048709372 0.0018689942 0.0037105710 0.0001327370 -0.0032097701 -0.0012795343 -0.0001268251 -0.0001145880 0.0000326932 0.0001388637 -0.0000109130 0.0000205298 0.0002162628 -0.0000188826 -0.0007914831 -0.0000232930 0.0000504744 -0.0000072480 0.0000485339 0.0000244098 -0.0000221247 0.0000178690 -0.0000155479 0.0000061869 -0.0000238412 -0.0000293495 -0.0000180352 -0.0000514156 0.0000206314 0.0000501128 0.0000076946 0.0000043267 -0.0000042063 0.0001815936 -0.0001275632 -0.0001642567 0.0000526985 -0.0005865684 0.0001041918 -0.0006258131 0.0003564644 0.0001229103 -0.0000015790 -0.0000181532 -0.0000203155 0.0004314417 0.0002471476 -0.0001204423 -0.0001153003 -0.0001368619 -0.0000636229 0.0003254048 0.0006048280 0.0010774280 -0.0275063885 -0.0233821356 -0.0114931309 -0.0001112757 -0.0000317481 -0.0001799355 0.0000293010 -0.0001623366 -0.0000877258 0.0000747173 0.0000694543 0.0000211389 -0.0000183110 0.0000358833 0.0000336579 0.0000118521 -0.0000772342 0.0000088723 0.0001008563 0.0001078446 -0.0002252603 -0.0000051388 -0.0000267070 -0.0000013963 -0.0000564874 0.0000872093 0.0000861983 -0.0000392821 -0.0000572912 -0.0000548216 0.0001958064 0.0000429892 -0.0000905031 -0.0000069990 0.0000813249 -0.0001097009 -0.0002299398 0.0004342883 0.0002726452 -0.0009827909 -0.0005247062 0.0011256734 0.0003473628 -0.0004183305 0.0005159423 -0.0003733051 -0.0004861707 0.0004007960 0.0000347985 -0.0000015675 -0.0000428335 -0.0000087465 -0.0000036547 -0.0001116217 -0.0000208255 0.0000102836 0.0000099669 0.0000598341 0.0000656529 0.0001162382 0.0000400040 0.0001348571 0.0001475812 0.0000186700 -0.0001489510 -0.0000926981 -0.0285179200 0.0182941128 -0.0049646671 -0.0029959743 0.0037734858 0.0066320430 0.0114619143 0.0012073147 0.0069072087 0.0068872955 -0.0029993995 -0.0011680456 0.0079178662 -0.0096070085 -0.0072431839 -0.0085263327 -0.0009097989 -0.0025057447 0.0354493743 0.0087490538 0.0169079970 0.0208267247 -0.0047269830 0.0017927179 -0.0015764641 0.0005554192 0.0001742709 0.0311777247 -0.0112725894 0.0009087395 0.0123816177 -0.0174216851 -0.0191915754 -0.0031106925 -0.0023876345 -0.0063676660 0.0121921664 0.0039829376 -0.0066336637 0.0027209031 0.0013892240 0.0004033458 0.0036450316 0.0050223776 0.0128339901 -0.0055382301 0.0011669258 0.0045779789 0.0381033657 0.0168592587 -0.0180530761 0.0227732038 0.0103101693 0.0055816122 -0.0008797654 -0.0003953710 -0.0003117169 0.0061530229 0.0073077092 0.0131902693 0.0334726841 0.0255666399 0.0581567847 -0.0007163294 0.0013981794 0.0019480101 -0.0014708568 -0.0006915391 -0.0016054023 0.0000055964 -0.0005484501 -0.0009074595 -0.0011665177 -0.0000007855 0.0006283844 -0.0180421981 0.0196034919 -0.0042603875 -0.0404144958 -0.0050989439 0.0087532241 0.0348146317 -0.0161888476 0.0000520396 -0.0249457879 0.0285274102 -0.0071182371 0.3960972139 -0.0479019924 -0.0445275536 -0.1983661206 0.3528843458 -0.1025093366 -0.0000135700 -0.0173521855 0.0063728112 -0.0060997661 -0.0075748319 0.0031393289 0.0830365507 -0.0300620511 -0.0115945106 -0.0455064580 -0.0641467414 0.0386892228 -0.0250708408 -0.0033417829 -0.0375268980 -0.0180396084 -0.0257371801 -0.0025751200 0.0046172942 0.0176325222 -0.0066331611 -0.0054919991 0.0093169433 -0.0139691786 0.0861892535 0.0600985000 0.1022807527 -0.0252435467 0.0974901548 -0.1293879416 0.0288787928 0.0261541809 0.0227189075 -0.0262178205 -0.0387192710 -0.0086084963 0.2969152974 0.1437350735 0.3455565536 -0.2403224632 -0.4730077706 0.0047383620 0.0000492239 -0.0000033590 0.0000865773 0.0001557595 0.0002655116 -0.0001239502 0.0001474382 0.0002860216 -0.0002880769 -0.0001040103 -0.0001962746 -0.0000411992 0.0000137608 0.0000602034 0.0001282550 0.0003863381 -0.0005363842 -0.0003631565 -0.0004022536 0.0001713173 -0.0002080311 -0.0004194103 0.0001151971 0.0001249142 0.0005047172 0.0004760065 -0.0002291838 -0.0059204523 0.0002769305 0.0003281211 -0.0006023126 -0.0001199197 0.0001458189 -0.0009454327 0.0006633660 -0.0003649712 -0.0005338307 0.0003111781 -0.0000302994 -0.0002919452 -0.0016529253 0.0012039872 0.0007946462 -0.0009065335 0.0013577590 0.0000787230 0.0001290409 -0.0002354904 -0.0000387768 0.0005459484 -0.0000788772 -0.0002934525 0.0008537817 0.0006300994 -0.0001834568 0.0001446426 -0.0006562062 0.0006372396 0.0003646679 0.0001033630 -0.0011749531 -0.0001311489 -0.0006821015 0.0009371837 0.0003694970 -0.0002716221 0.0014758516 0.0000740016 0.0009018697 0.0060710379 -0.0224443899 -0.0249504103 0.4691461157 0.3829549715 -0.1359840534 0.0406161147 0.0305783894 -0.0162462503 -0.0152126186 0.0076785943 0.0133724806 0.0142185772 -0.0180331667 -0.0164657043 -0.0432740878 0.0076341978 0.0320572029 0.0002361256 -0.0117845405 -0.0055970268 -0.0013710592 0.0057335629 0.0041968778 0.0290363258 -0.3449961123 -0.1307002605 -0.4738517278 0.1829840172 0.3348665052 0.0091888163 -0.2846071020 -0.1040630045 -0.0040952969 -0.0133355657 -0.0018291177 0.0089494355 0.0037227514 -0.0004970961 0.0096675730 0.0060643068 -0.0368397744 0.0010020929 0.0017609371 -0.0006712101 -0.0002001829 -0.0005972420 -0.0000250447 -0.0008818909 0.0008317317 0.0008023581 0.0000842776 -0.0023271811 -0.0001652026 -0.0015202735 0.0006763380 0.0007916760 0.0009074306 0.0005047872 -0.0003398342 -0.0040135716 0.0027236683 0.0004591517 -0.0011894083 -0.0220685583 -0.0049636798 -0.0090448327 0.0055993426 0.0048284091 0.0013223368 0.0072504267 0.0006564594 -0.0050264086 -0.0035711705 0.0013897023 -0.0022255620 -0.0009742812 -0.0014125331 0.0037877861 -0.0259324482 0.0224203401 0.0014169826 0.0008474561 0.0003146906 -0.0015933877 -0.0003667105 -0.0012816553 0.0002195505 -0.0025491689 -0.0016137335 0.0007653123 0.0010678493 0.0003012909 0.0005160881 0.0000985404 -0.0000929480 -0.0003450390 -0.0000381024 0.0000762227 -0.0002936380 -0.0001495357 0.0000124374 -0.0003673813 -0.0000300440 0.0001226572 -0.0009454613 0.0011346244 0.0008915538 0.0002728895 -0.0008567596 -0.0003599215 0.0001185151 0.0003597016 0.0000331203 -0.0006080663 0.0011838280 -0.0006263050 0.0007237051 -0.0009846574 -0.0001987069 0.0001610803 -0.0000482173 -0.0016658277 0.0001706383 -0.0004887536 0.0030641389 -0.0006145602 0.0007870995 -0.0004664487 0.0002673818 0.0004927313 0.0000303642 0.0003110673 -0.0011083239 -0.0012021911 0.0004464113 0.0001598960 0.0003532611 -0.0011114085 0.0003594844 0.0007074553 0.0000452359 -0.0003915914 -0.0006034239 -0.0011919965 0.0020464809 0.0011446739 0.0006870019 -0.0004187959 0.0002863688 -0.0000111760 -0.0001074761 -0.0003277944 -0.0002724732 -0.0002065053 -0.0003522450 -0.0001032595 0.0000396293 0.0000360708 0.0000212317 0.0002157677 0.0002639770 -0.0000162452 0.0001649288 0.0001181771 -0.0028598468 -0.0003381370 -0.0010951458 0.0005091453 -0.0010032676 -0.0008298357 -0.0000385551 0.0000798104 -0.0000661117 0.0023397217 0.0001248442 0.0012520666 -0.0020270163 0.0021167401 0.0013666950 0.0016892771 0.0027091625 0.0056356932 -0.0034953648 -0.0014460160 0.0021475527 -0.0132582650 -0.0071785613 -0.0053015941 0.0010637535 -0.0007227217 -0.0024685200 0.0029055203 0.0005509851 -0.0032825630 0.0104606622 0.0051628413 0.0048411091 0.0067394600 0.0100875292 0.0187824555 0.0035503111 -0.0001428504 -0.0010387475 0.0283034294 0.0161625668 -0.0115146387 0.0015204970 -0.0005176655 -0.0058995410 0.0000051353 -0.0001697720 -0.0001926097 0.0001384339 0.0000663451 0.0002436736 -0.0010146813 0.0029142496 0.0059133094 0.0031007797 -0.0007319758 -0.0030720573 0.0010365004 -0.0003298864 -0.0000344366 0.0009674226 0.0006923922 -0.0004716545 -0.0010645436 -0.0000122867 0.0001972204 0.0008013433 -0.0008362202 0.0001904559 -0.0131114752 0.0009901212 0.0016810979 0.0058916153 -0.0103487659 0.0030239296 -0.0004735932 -0.0000610175 0.0000421011 0.0005942263 0.0004691957 -0.0002313487 -0.0058465980 0.0007165116 0.0014806294 0.0048599134 0.0064716077 -0.0036767555 0.0003036463 0.0008157538 -0.0001511050 -0.0011251583 -0.0004081945 -0.0012834298 0.0007211356 -0.0007168179 0.0015696488 -0.0006721166 0.0005574679 -0.0014157900 0.0069898189 0.0026677787 0.0108497960 -0.0033589478 0.0106189913 -0.0142815492 -0.0001238393 -0.0007748599 0.0003912285 -0.0001030088 -0.0002732433 0.0000224989 0.0020020216 0.0002058239 0.0032782557 -0.0008338481 -0.0017284187 0.0001017348 0.0001436245 -0.0002188257 0.0005365764 0.0005758471 0.0023428911 -0.0013653347 0.0007069738 0.0012895042 -0.0018251375 0.0025397440 0.0022382842 0.0018483403 0.0007176852 0.0006843377 0.0009111276 0.0041558996 -0.0022417598 -0.0026494183 -0.0000305021 -0.0014889516 -0.0022067140 -0.0037682354 -0.0001002863 0.0021621372 0.0100040852 0.0120952884 -0.0050051621 -0.1268592669 0.0087683869 0.0086902835 -0.0124179202 -0.0013095049 0.0022022874 -0.0254762435 0.0119300787 -0.0097168850 -0.0139750796 0.0023579995 0.0019459717 -0.0093531890 -0.0343599210 0.0220518510 0.0283231595 -0.0164344115 0.0413926527 0.0056950859 0.0043843137 0.0016759161 0.0022219027 0.0130745791 -0.0071538309 0.0274656471 0.0232488471 0.0360894514 -0.0131255719 0.0057828168 -0.0192465232 0.0116507042 0.0019358357 -0.0020665058 -0.0008063077 0.0000889026 -0.0000906069 0.0016085929 -0.0002149450 -0.0018177179 0.0015489834 -0.0019525142 0.0024739672 -0.0004655812 0.0009043910 0.0008267687 -0.0171701491 -0.0146341319 0.0056339347 -0.0014682729 -0.0011542479 0.0004930479 0.0005728228 -0.0002777762 -0.0005245544 -0.0005130612 0.0005234767 0.0006527233 0.0016900597 -0.0002918015 -0.0012017523 -0.0000519951 0.0005248844 0.0002497176 -0.0000135833 -0.0001545886 -0.0000755834 -0.0014923747 0.0126886398 0.0041025303 0.0181115465 -0.0069513255 -0.0133611432 -0.0003510659 0.0115089899 0.0043419237 0.0000584073 0.0004869398 0.0001256153 -0.0001583464 -0.0001589664 0.0000641696 -0.0006145840 0.0001612360 0.0007299185 -0.0000232847 -0.0000802807 -0.0000287158 -0.0000771782 -0.0000265125 0.0000315816 0.0000421958 -0.0000420276 -0.0000152732 0.0000355536 0.0000551572 0.0000024570 0.0000783814 -0.0000239603 -0.0000532452 -0.0000311136 0.0000570872 0.0000211076 0.0001846430 -0.0001440248 -0.0001268252 0.0000385065 0.0007613998 0.0000695054 0.0007083427 -0.0004007023 -0.0001891322 0.0000002864 0.0005764709 0.0001202512 -0.0006331756 -0.0003758484 0.0002593954 -0.0002088346 0.0000838611 0.0001923276 0.0001391625 0.0007566455 -0.0043999035 0.0292797441 0.0188630259 0.0097681927 -0.0001024390 -0.0000722969 -0.0001357399 -0.0000012887 -0.0001299853 -0.0000408473 0.0000365756 0.0000647798 -0.0000026600 0.0000410829 0.0000175463 0.0000386567 0.0000989211 -0.0001760112 0.0000346404 -0.0001646024 -0.0000667580 0.0001295794 -0.0000228803 -0.0000190988 -0.0000371808 -0.0000407027 0.0001187934 0.0000088720 -0.0000094657 -0.0001534054 0.0000850754 -0.0005167174 0.0003970328 -0.0006426552 -0.0003356272 0.0007404422 0.0002108324 -0.0004693106 0.0007633537 0.0004667209 0.0007820779 0.0005593379 -0.0002716434 -0.0003285054 0.0003845648 -0.0006304062 0.0006100037 0.0002313970 -0.0003594514 0.0000964913 0.0001400994 0.0001723453 -0.0000145080 -0.0000110307 -0.0001007916 -0.0000466108 -0.0001616982 -0.0001070976 0.0000083023 -0.0005635050 -0.0004353135 -0.0000702728 0.0004029847 -0.0001020881 0.0000608449 0.0005517826 0.0000257087 0.0098184025 -0.0077713228 0.0043800520 0.0012019403 -0.0011684579 -0.0033426833 -0.0043225545 -0.0003278250 -0.0026221169 -0.0032832297 0.0015693804 0.0007796236 -0.0032549199 0.0034421973 0.0023789996 0.0039989469 0.0000459733 -0.0000150457 -0.0144855816 -0.0050480304 -0.0056437469 -0.0086178370 0.0016087735 0.0002214413 0.0006874100 -0.0002556288 -0.0001064901 -0.0140800305 0.0039162280 -0.0012985041 0.0000163743 -0.0008509745 0.0052500148 0.0017088057 0.0021621222 0.0052530272 -0.0119007632 -0.0040292724 0.0057610001 -0.0016192490 -0.0009101170 -0.0005532811 -0.0048200131 -0.0057448168 -0.0119532183 0.0056328691 0.0022758010 -0.0021094703 -0.0490508169 -0.0178023604 0.0180038093 -0.0222843079 -0.0129241625 -0.0071072788 0.0006423955 0.0004337878 0.0003267706 -0.0276696461 -0.0159242205 -0.0076496726 -0.0129576252 -0.0168148103 -0.0309745509 0.0003515071 -0.0006584078 -0.0009101331 0.0006201900 0.0003154844 0.0007169060 0.0002440604 0.0004086009 0.0005442123 0.0007172686 0.0000609196 -0.0002612191 0.0284201639 -0.0083341895 -0.0009053670 0.0201725636 0.0194628712 -0.0117662079 -0.0245827715 -0.0023985878 0.0050897067 0.0195286686 -0.0205931186 0.0046380675 -0.3242131530 0.0231436861 0.0437672836 0.1433045183 -0.2513236510 0.0743338468 -0.0152141180 -0.0049072221 0.0017665882 0.0182934184 0.0123653441 -0.0065340978 -0.1675798959 0.0192318857 0.0485251595 0.1464342609 0.1929293823 -0.1082417128 0.0078229033 0.0246807593 -0.0068918029 -0.0310426463 -0.0155838816 -0.0324570717 0.0218849964 -0.0187688331 0.0448385904 -0.0221577658 0.0186134497 -0.0469308669 0.2303916454 0.0945150617 0.3529337929 -0.1134135474 0.3602434803 -0.4826509279 0.0014449162 -0.0165355444 0.0143942018 -0.0104494582 -0.0179774078 -0.0028919303 0.1240299731 0.0387260168 0.1709220152 -0.0948542450 -0.1860612323 0.0038440495 0.0000808953 0.0000540569 0.0000656246 0.0002911513 0.0003250680 -0.0001509034 0.0000559119 0.0000635462 -0.0001409410 -0.0002053960 -0.0002613822 -0.0001068646 -0.0000663768 -0.0000457212 0.0001418734 0.0006424522 0.0000025593 -0.0003599668 -0.0001399113 -0.0002035445 -0.0002491118 0.0001648273 0.0003358041 -0.0003747655 -0.0002546299 0.0010041531 -0.0004665098 -0.0001811078 0.0007672928 -0.0009737564 0.0003926967 0.0007318353 -0.0000962687 -0.0041423543 -0.0036138042 0.0019800419 0.0007266881 -0.0059422286 0.0023238979 0.0018338850 0.0036649583 -0.0008233365 -0.0003960755 0.0027871520 -0.0025688453 0.0001951321 -0.0004807535 0.0007473143 -0.0003633701 -0.0002678461 -0.0005313587 0.0040482610 0.0006993046 0.0044965238 0.0004203480 -0.0005135369 0.0005955013 0.0020326747 0.0014271211 -0.0002681191 0.0002721197 0.0000410382 0.0000753068 -0.0005855928 -0.0003629448 0.0003792825 -0.0002152060 0.0001959597 -0.0007167142 0.0027157098 0.0005805470 0.0008489650 -0.0002073431 0.0003455962 0.0001813115 -0.0002545673 0.0002771514 0.0002670358 -0.0007358479 0.0016465869 0.0011680934 0.0005988871 -0.0000731869 -0.0004376862 -0.0002004937 -0.0007366488 -0.0001339714 -0.0000217793 -0.0000507014 -0.0000712882 -0.0005455277 -0.0004888751 0.0002486255 0.0007971908 -0.0013531623 -0.0006859945 0.0005471399 -0.0011062923 -0.0007391046 0.0002700607 -0.0044161298 -0.0012897970 0.0014519940 0.0014144508 -0.0009801599 -0.0000573388 -0.0037627295 -0.0004688716 -0.0052983989 -0.0001311565 0.0071704220 -0.0025835054 -0.0012899994 0.0003229940 0.0456066198 0.0196782557 -0.0180317714 -0.0240080563 0.0137019875 0.0112924607 0.0020817179 0.0055695423 0.0004065981 -0.0246089707 0.0180480515 0.0147652048 0.0046365215 -0.0543362432 -0.0086057088 -0.2652998160 0.1672837997 0.1381901841 0.0017264439 -0.0326037095 -0.0052840866 -0.2599409447 0.1692045555 0.1212702044 -0.0187382677 -0.5944163237 -0.0833080331 0.5044030280 0.2975376352 -0.1654957842 0.0002140339 0.0003536125 -0.0000381153 0.0000144120 -0.0004745229 0.0012405362 -0.0032950089 -0.0025989297 -0.0013099734 0.0004589303 -0.0023309359 0.0002295372 0.0026558325 -0.0013783712 -0.0010280342 -0.0000532863 0.0004762126 -0.0001428652 -0.0002250333 -0.0000530529 0.0000750468 0.0000745626 0.0000868183 -0.0000932295 0.0000454147 0.0000001099 -0.0000553685 0.0000280920 0.0000934093 0.0000167910 -0.0039562402 0.0053313169 -0.0071364079 0.0060850152 -0.0110278651 0.0171514178 0.0000264354 -0.0004391966 0.0002750946 0.0001537967 -0.0004140350 0.0003050302 -0.0000383546 0.0000476349 -0.0001425431 0.0000942038 0.0000793030 0.0004084999 -0.0000706943 0.0002619942 -0.0006630706 0.0001070190 0.0001669832 -0.0002516924 0.0000032555 -0.0001413846 -0.0007731411 0.0000867584 -0.0001247597 0.0004107314 0.0004374535 -0.0005921884 -0.0001601199 -0.0135979969 -0.0737736689 -0.0664823399 -0.0152357578 0.0283921228 -0.0382161366 -0.0021027838 0.1011424478 0.0239272718 -0.0055938688 0.0032778604 -0.0002903138 -0.0006110070 0.0001483864 0.0001561314 0.0018829300 0.0000320293 0.0008548361 -0.0013576600 0.0003421845 0.0001051750 0.0012715127 -0.0013587736 -0.0011109310 -0.0008184957 0.0002248166 0.0000808404 0.0049047591 0.0001344158 0.0023597460 0.0079377737 -0.0054774272 -0.0027856311 0.0000265845 0.0006007431 -0.0007411798 0.0111029845 -0.0022958980 0.0032194222 0.0041389368 -0.0046014924 -0.0032227828 -0.0003066434 -0.0002017709 -0.0004848370 0.0013547626 0.0004237149 -0.0007030590 -0.0001002009 -0.0000657774 -0.0000967713 0.0004127464 0.0005919464 0.0014068065 -0.0005324474 -0.0000049770 0.0003267898 0.0057348689 0.0022642622 -0.0020031687 0.0026480965 0.0014889846 0.0009179275 -0.0000211769 -0.0000331480 -0.0000173644 0.0022636919 0.0012962248 0.0011348331 0.0033610047 0.0029217825 0.0058311874 0.0002566443 -0.0010019067 -0.0009970019 0.0010633191 0.0003006049 0.0012434812 -0.0000310135 0.0000135286 0.0000239501 -0.0000180598 -0.0000157301 -0.0000346095 0.0054133981 -0.0001876920 -0.0008338749 -0.0020091393 0.0029473359 -0.0008033133 -0.0000638710 -0.0022821374 0.0009250972 0.0006685673 -0.0006660244 0.0001229670 -0.0141988131 -0.0013285698 0.0027713313 0.0023366445 -0.0036699519 0.0011884181 -0.0052999729 -0.0036339186 0.0019993129 0.0048799015 0.0018767598 -0.0013485913 -0.0377811541 0.0011657778 0.0121015725 0.0341779608 0.0429492651 -0.0239002105 -0.0012754613 -0.0007349405 -0.0017030288 0.0010512913 0.0005089575 0.0013125640 -0.0010430947 0.0011436099 -0.0027399460 0.0011254963 -0.0004369073 0.0021067797 -0.0101385088 -0.0033159228 -0.0153914766 0.0052340902 -0.0149747185 0.0204269060 0.0010122905 0.0012197026 0.0005840718 -0.0004576856 -0.0004533874 -0.0002728209 0.0056644682 0.0031817575 0.0058368216 -0.0041567621 -0.0079506724 -0.0000484074 -0.0011891181 0.0009126983 -0.0000286193 0.0029529281 -0.0001542213 0.0005879778 -0.0023534124 -0.0016127395 -0.0013986368 0.0107416977 0.0015344880 -0.0018195642 -0.0001332157 0.0014660429 0.0002894460 -0.0019566983 -0.0019100811 0.0003215249 0.0022321776 -0.0020724823 -0.0016788244 -0.0046807961 0.0006127768 0.0024670548 0.0043730120 -0.0120626159 0.0053985047 -0.0097929274 -0.0078195818 0.0122682317 -0.0043135538 -0.0084996437 0.0011230362 0.0474162193 0.0423153445 -0.0231884250 -0.0082616504 0.0698302369 -0.0273304565 -0.0215712198 -0.0428288625 0.0094675202 0.0049659620 -0.0326510194 0.0302775573 -0.0021589703 0.0055464328 -0.0085051351 0.0041900833 0.0031830029 0.0060966025 -0.0466918356 -0.0079182885 -0.0515591609 -0.0057249350 0.0065772317 -0.0072333216 -0.0240073631 -0.0165949087 0.0030750574 -0.0005309400 -0.0000548424 -0.0015573587 0.0031057637 0.0024151694 -0.0018324067 0.0015729790 -0.0015027735 0.0070180390 -0.0017733247 0.0014027986 -0.0001423848 -0.0010705692 -0.0018629493 0.0011570373 -0.0000442809 -0.0002298666 -0.0001293449 0.0000706972 0.0001033424 -0.0000705316 0.0001990382 -0.0000424901 0.0001105663 0.0000355796 0.0000880985 0.0000515229 -0.0001338472 -0.0002198362 0.0000057012 0.0000306574 0.0005525296 0.0000772640 -0.0007039775 0.0011565059 -0.0011559254 -0.0001794533 0.0002112828 -0.0002636320 -0.0000837404 -0.0016046587 -0.0004732096 0.0002774457 0.0001067890 -0.0000656326 0.0001241535 -0.0003997989 -0.0001604355 -0.0008451790 0.0003033060 0.0009034665 -0.0003470734 0.0000398096 0.0000774178 0.0054167603 0.0022985807 -0.0021488533 -0.0029953674 0.0017189636 0.0014124902 0.0003279757 0.0006975528 0.0001761988 -0.0029330231 0.0020474639 0.0016793071 0.0006410572 -0.0065233312 -0.0010643576 -0.0321400526 0.0202607850 0.0166324936 -0.0003268014 -0.0029806620 -0.0017672176 -0.0297300841 0.0192974772 0.0141454085 -0.0021802169 -0.0711476689 -0.0100520479 0.0592726251 0.0349611284 -0.0195948620 -0.0004415499 -0.0000646473 0.0005632185 -0.0003374021 0.0001381895 -0.0140129785 0.0385488481 0.0302679517 0.0152292766 -0.0000608409 -0.0004677284 -0.0003139928 0.0011324122 -0.0000630651 -0.0003125560 0.0000293452 0.0000412406 -0.0001226252 -0.0004404562 0.0000325092 0.0004228855 0.0006294841 -0.0006806900 -0.0000491814 0.0000217506 -0.0000738706 0.0000180062 0.0002268999 0.0001692601 -0.0000833483 -0.0005980763 0.0010367493 -0.0008374598 0.0003519706 -0.0018280547 0.0024836127 -0.0000382358 0.0011939793 -0.0018628996 -0.0003800519 0.0014737913 0.0000281313 -0.0035983043 0.0042447669 0.0017279502 0.0002063211 0.0002670701 0.0008436275 -0.0001408185 -0.0012210141 -0.0032487361 0.0035089931 0.0014965633 -0.0022787177 -0.0006469279 -0.0008210561 -0.0006300818 0.0003533789 -0.0002270136 -0.0002682931 -0.0006665885 -0.0014419444 -0.0009678477 -0.0006974152 -0.0114281247 -0.0098643084 -0.0020587159 0.0065112231 -0.0040159041 0.0005770073 0.0140279190 0.0022289147 0.0648140338 -0.0380985186 0.0035655038 0.0087705211 -0.0084682774 -0.0084208310 -0.0252757435 -0.0020100123 -0.0143646747 -0.0106868982 0.0044343913 0.0012285250 -0.0158566095 0.0205657840 0.0162753705 0.0157134665 0.0004367778 0.0057802166 -0.0554793033 -0.0088260237 -0.0349702069 -0.0550680718 0.0217941436 0.0018373623 0.0025363151 -0.0008251044 -0.0003621836 -0.0721844576 0.0256116218 -0.0051533729 -0.0398920889 0.0562967865 0.0439327254 0.0036973517 0.0026373188 0.0061271817 -0.0160274124 -0.0051476573 0.0085036250 -0.0004764301 -0.0001767388 0.0004335725 -0.0050804729 -0.0070006458 -0.0168374712 0.0069223690 0.0004262941 -0.0038880717 -0.0642302784 -0.0251952710 0.0234097800 -0.0303339846 -0.0163368636 -0.0090158469 0.0006413622 0.0003038796 0.0002658876 -0.0248170730 -0.0163673566 -0.0135498613 -0.0370966991 -0.0326795289 -0.0663448182 0.0013267489 -0.0020728783 -0.0027084427 0.0026354269 0.0008279317 0.0023068719 0.0002910992 0.0002136481 0.0001401217 0.0005516875 0.0002007283 0.0000406193 -0.0616869272 0.0025603521 0.0093088961 0.0235520714 -0.0344516234 0.0093548349 0.0001840177 0.0261996335 -0.0105343352 -0.0079527414 0.0074844881 -0.0013079941 0.1600939957 0.0154649029 -0.0313158876 -0.0276313015 0.0429974718 -0.0137760390 0.0616391606 0.0422743284 -0.0231881842 -0.0567352861 -0.0217163749 0.0156103659 0.4413675174 -0.0140328013 -0.1415766316 -0.3984568946 -0.5007986413 0.2788024688 0.0150945665 0.0087696203 0.0201747807 -0.0123987686 -0.0060699764 -0.0154155612 0.0124862966 -0.0134969839 0.0325000744 -0.0134626692 0.0050864127 -0.0250862104 0.1203476430 0.0396452549 0.1830845829 -0.0624828779 0.1783745970 -0.2433890404 -0.0117938832 -0.0142206579 -0.0068151839 0.0051835552 0.0051624070 0.0030275434 -0.0651845204 -0.0366514120 -0.0668405818 0.0474245139 0.0909762400 0.0005197190 -0.0000042498 0.0000698415 0.0000229213 0.0003088317 0.0001531510 -0.0000803906 0.0000783276 0.0002636212 -0.0003373528 0.0010657800 0.0000896998 -0.0001419165 -0.0004355865 -0.0000216830 0.0005035921 0.0021163929 0.0005228432 -0.0010583666 -0.0003302383 -0.0002540442 -0.0000815670 -0.0000249031 0.0009951887 -0.0009242584 0.0000396469 -0.0000346089 0.0000131371 -0.0001210710 0.0000205906 0.0000288388 0.0000049594 0.0000042012 -0.0000083408 0.0000983098 0.0001667200 -0.0000961153 -0.0001318379 0.0001199297 -0.0000372935 -0.0000967142 -0.0001731753 0.0000336259 0.0000366911 -0.0001319736 0.0001479139 -0.0000073087 0.0000154840 -0.0000152905 0.0000258101 0.0000298141 0.0000163457 -0.0001129893 -0.0000443090 -0.0001697217 -0.0000742346 0.0000476515 -0.0000461672 -0.0000386798 -0.0000473343 -0.0000148928 0.0000755862 -0.0000509712 0.0001737536 -0.0000260209 0.0000076997 -0.0000117682 -0.0000734190 0.0000890204 -0.0002802218 0.0001337898 0.0007309227 0.0005875222 0.0005341344 0.0004901931 -0.0001877527 0.0000300404 0.0000531107 0.0000033726 0.0000697860 0.0001643606 -0.0000350987 0.0001273094 0.0000649568 -0.0000381823 -0.0002059316 -0.0000094424 0.0001461420 -0.0000581260 -0.0002073780 -0.0000535506 -0.0001056602 -0.0000436319 0.0000442487 0.0000772179 0.0003195702 -0.0000524503 -0.0017675540 0.0006175359 0.0012567267 -0.0000504668 -0.0027244783 -0.0010997250 0.0005404381 0.0004409599 -0.0002537949 -0.0004542414 -0.0010156518 -0.0006873635 0.0003435791 -0.0019664968 0.0030041375 -0.0000103187 0.0000992953 0.0000994461 0.0086801188 0.0033465187 -0.0036522419 -0.0053065052 0.0025592107 0.0008307988 0.0000762542 0.0010369770 -0.0000471712 -0.0048385133 0.0032026175 0.0025469946 0.0006234335 -0.0100149321 -0.0019371143 -0.0474551735 0.0296870666 0.0277614743 0.0003493610 -0.0052101179 -0.0002532736 -0.0467623040 0.0305877477 0.0240391375 -0.0035443204 -0.1080609415 -0.0154709150 0.0935448948 0.0539590837 -0.0283400783 0.0000013874 0.0000413622 0.0000228637 0.0000076471 -0.0002531241 -0.0004413049 0.0001619460 0.0001261884 0.0000653781 -0.0027025202 0.0055389630 0.0009258870 -0.0062411953 0.0048328506 0.0036668693 0.0000833993 -0.0020414549 0.0014269952 0.0003535403 0.0000138356 0.0000380766 -0.0000498408 -0.0000990768 0.0000720768 -0.0001503900 -0.0000966824 0.0002272033 0.0003435797 -0.0004713246 -0.0003282885 0.0239118250 -0.0315119822 0.0463559498 -0.0428209650 0.0671277188 -0.1083956987 -0.0003874863 0.0007046150 -0.0005458093 -0.0001936160 0.0004626801 -0.0002338972 -0.0001285400 0.0002274550 0.0002139852 0.0005608894 0.0003471984 -0.0006829546 -0.0003135690 0.0002502941 -0.0004081418 0.0003209055 0.0003318428 -0.0002676382 -0.0004557924 0.0001712126 0.0052746170 -0.0009876888 0.0024183091 -0.0016864145 -0.0041280069 0.0026203889 -0.0001772171 0.0897938864 0.4640185700 0.4222386732 0.0993785547 -0.1430584991 0.2575130404 0.0172330681 -0.6493055346 -0.1584245302 0.0001416464 -0.0000876498 0.0000044064 -0.0000142803 -0.0000520840 -0.0000437627 -0.0000629348 -0.0000074538 -0.0000426724 -0.0001110460 0.0000245836 0.0000117195 -0.0000228460 0.0000701738 0.0000529578 0.0000393438 0.0000277671 0.0000534837 -0.0002260789 0.0001041003 -0.0003092285 0.0001467531 -0.0002022877 -0.0001893376 0.0000178439 0.0000317315 -0.0002216816 0.0002004563 0.0000036595 0.0002086449 -0.0001599819 0.0002879632 0.0001630662 -0.0000091399 -0.0000121437 -0.0000066952 -0.0000698680 -0.0000027063 0.0000167640 0.0001655118 0.0000828913 0.0000446602 0.0000128532 0.0000058101 -0.0000335931 -0.0000381475 -0.0000333585 -0.0000014738 -0.0003877099 -0.0002329515 0.0001049260 -0.0001936561 -0.0001316975 -0.0001718131 -0.0000137172 -0.0000195687 -0.0000197628 -0.0001380170 -0.0001091395 0.0000257299 -0.0004604247 -0.0003405043 -0.0005650807 0.0000534384 -0.0000631542 -0.0000414397 0.0001656324 0.0000095629 0.0001409143 0.0000122289 -0.0000159962 -0.0000445540 -0.0000560402 0.0000178023 0.0000507013 -0.0000924372 0.0000186710 0.0000099029 0.0001358051 -0.0000271105 -0.0000095291 -0.0000700506 0.0000582126 -0.0000118214 0.0000024437 0.0000005993 0.0000019482 -0.0002602400 0.0000782864 0.0000044730 0.0000748303 -0.0001380580 0.0000345421 0.0001649834 0.0000968174 -0.0000791474 -0.0001571326 -0.0000640855 0.0000555742 0.0013897715 0.0000070513 -0.0002326438 -0.0011395253 -0.0014545401 0.0007238896 0.0000733857 0.0000558126 0.0000750521 -0.0000682120 -0.0000323398 -0.0000860417 0.0000719340 -0.0000664080 0.0001672940 -0.0000757080 0.0000345949 -0.0001382676 0.0006692756 0.0002241152 0.0009880749 -0.0003211560 0.0009948849 -0.0013838429 -0.0000482279 -0.0000691696 -0.0000137834 0.0000095634 0.0000062178 0.0000088611 -0.0001457234 -0.0001351330 -0.0001586771 0.0001375305 0.0002081824 -0.0000104212 0.0007275999 -0.0023910161 -0.0002071838 -0.0040447037 -0.0026036588 0.0002607522 0.0051171810 0.0067569456 0.0015028164 -0.0063900283 -0.0010307520 0.0021537523 0.0014650732 -0.0030648420 -0.0015828713 0.0041176686 0.0040685046 -0.0007056398 -0.0008043238 0.0024643258 0.0029095245 0.0105720668 -0.0026925296 -0.0042589676 0.0011357814 0.0015273136 -0.0004670894 -0.0214671495 0.0001577114 0.0025086711 -0.0008536499 -0.0016031673 0.0006279872 -0.0003142265 0.0013416951 -0.0007755833 -0.0001671437 0.0046509413 -0.0018985996 -0.0018928051 -0.0016808774 -0.0024533982 -0.0019782000 -0.0066448870 0.0023496758 0.0001667324 -0.0011265515 0.0009466792 0.0033186646 0.0077686280 0.0000930655 -0.0012458547 0.0068243315 0.0138230236 -0.0002593539 0.0001183572 0.0015830585 -0.0014594303 -0.0008946176 0.0002402246 0.0022505938 -0.0008820177 0.0018528730 -0.0017863343 -0.0006844818 0.0009878440 -0.0011110137 0.0015187192 -0.0041667188 0.0066550922 -0.0091749839 -0.0101474930 -0.0095634215 -0.0094291232 0.0066449027 -0.0018352761 0.0000055725 0.0006813378 -0.0077613608 0.0029924847 0.0064374222 0.0036087152 -0.0010755293 -0.0023977011 0.0022522089 -0.0030084767 -0.0029169802 0.0023667961 0.0049334060 0.0001887794 -0.0038619614 -0.0011588084 0.0024031017 0.0033877740 -0.0196231786 -0.0110775752 0.0264028958 -0.0132235134 -0.0183022416 0.0017284594 0.0312574712 0.0102812771 -0.0013662884 -0.0030580708 0.0000374144 0.0024461817 0.0023328559 -0.0014928626 -0.0022174553 0.0063537311 0.0031195524 0.0042940439 -0.0055432643 -0.0028416046 0.0002017894 -0.0004942785 -0.0001325372 -0.0002962318 -0.0009497607 -0.0000424455 0.0001105815 -0.0011758797 -0.0001602725 -0.0000532421 0.0024025129 0.0003780346 -0.0021433863 0.0007882171 0.0009855651 -0.0096267821 0.0045583702 0.0050920068 0.0004019527 0.0004240975 0.0000543439 -0.0045481324 0.0055076414 0.0024385692 -0.0018908894 0.0109611485 0.0024369313 -0.0010717870 -0.0011241079 0.0001783382 0.0010313263 0.0027700449 -0.0000181161 0.0024831826 -0.0077753415 -0.0041779097 -0.0018518917 -0.0030785146 -0.0001796399 -0.0019571041 -0.0060106462 -0.0014713353 0.0024740651 -0.0034272407 -0.0030942901 -0.0004792046 0.0008384168 0.0008262932 0.0000802697 0.0002312630 -0.0000082082 0.0007801073 -0.0004750040 0.0000236996 -0.0000669042 -0.0001614312 0.0001741435 -0.0000492121 -0.0000474592 0.0000443059 0.0030990299 0.0050541749 0.0020213292 -0.0089522881 -0.0044010958 0.0006550659 -0.0048964828 -0.0019291969 0.0001186995 -0.0019322212 0.0051542609 0.0011705069 -0.0023263436 -0.0008696121 -0.0019318623 0.0003169196 0.0000613114 -0.0003174118 -0.0001864167 0.0000197039 -0.0002213649 0.0001696897 0.0004736718 -0.0004284819 0.0001071818 0.0000478293 -0.0001354297 0.0000737421 -0.0001819493 -0.0005166163 -0.0000998206 -0.0000704325 -0.0000114016 0.0215946035 -0.0171787549 -0.0081767889 0.0013841460 0.0386004740 0.0228096769 0.0162247064 -0.0116038784 -0.0221821812 0.0031126807 -0.0026623323 0.0001666912 -0.0024414404 0.0008290052 -0.0006090018 0.0005894056 -0.0010416913 -0.0005001239 0.0043154486 -0.0013145688 -0.0001694260 0.0008411349 0.0005000489 0.0011957432 -0.0010064760 0.0009125321 0.0002928827 -0.0258986283 0.0027592077 -0.0107328225 0.0103937416 -0.0092490803 -0.0068947913 -0.0005779137 0.0001465570 -0.0000437606 0.0052731472 0.0003711848 0.0029003783 -0.0182287743 0.0176984276 0.0105937916 0.0543435776 0.0334427308 0.0233201846 -0.0373130553 -0.0276561820 -0.0207958572 -0.1197251766 -0.0652597064 -0.0437071748 -0.0427139529 -0.0277725844 -0.0085999831 0.0552380550 0.0364250093 0.0159691443 0.5585216544 0.2491404722 -0.0841366412 -0.1843138753 -0.1354290100 -0.2153690874 0.0143673852 0.0080316122 0.0059964171 -0.2862966377 -0.1198834567 0.0392365849 0.3488693679 0.2813363090 0.4093529336 -0.0001982570 0.0005571865 0.0008301455 -0.0006584184 -0.0002996111 -0.0006848149 -0.0023088359 0.0192123614 0.0345713759 0.0321125363 -0.0036442413 -0.0241416487 0.0020574097 0.0010141148 -0.0007370943 0.0038491291 0.0002040117 -0.0008304953 -0.0013198252 -0.0010148911 0.0006086361 -0.0001117677 -0.0003591878 0.0001397403 -0.0076539703 -0.0006068735 0.0016205752 -0.0024972601 0.0039470482 -0.0009992308 0.0008779729 0.0008263180 -0.0003700864 -0.0017173695 0.0001775773 0.0002003695 0.0076485953 -0.0003266273 -0.0030785829 -0.0112705505 -0.0131605245 0.0072481815 -0.0015491162 -0.0032648978 0.0002603961 -0.0034953006 -0.0028733955 -0.0027851184 0.0028817560 0.0013420002 0.0033953495 -0.0006182344 0.0008720452 -0.0015402576 0.0174096977 0.0090091327 0.0239732098 -0.0022698618 0.0078289149 -0.0106725951 -0.0018287888 -0.0015183881 -0.0017617806 0.0016425934 0.0013146073 0.0014484737 -0.0195615339 -0.0088112538 -0.0217774941 0.0174505655 0.0328439594 0.0003699580 0.0002896531 0.0027404379 0.0010073986 0.0112457375 0.0055510651 -0.0017682279 -0.0022924073 -0.0019785355 -0.0023198289 0.0063964928 -0.0004319265 -0.0025201889 -0.0000930636 0.0029185638 -0.0001530373 -0.0063864318 -0.0030283613 0.0017393723 0.0063424491 -0.0058485512 -0.0042509257 -0.0023855041 -0.0015261558 0.0063200307 0.0018209861 -0.0010565520 0.0041555086 -0.0051939417 0.0028303513 0.0035720706 0.0018809940 0.0006748766 -0.0015496228 -0.0003479625 0.0019353191 -0.0010498674 -0.0007682973 0.0007414934 -0.0004914535 -0.0006085583 -0.0014203009 0.0005084379 0.0003082218 -0.0004808706 0.0005015565 -0.0000336618 0.0004914866 -0.0005542045 -0.0002877363 -0.0005276845 0.0001735790 -0.0004987733 0.0001324369 -0.0014641360 -0.0001439350 0.0003707774 -0.0003215793 0.0008049905 0.0005310603 0.0003688678 -0.0004285088 -0.0002481693 -0.0013582149 0.0000251310 0.0001482891 -0.0000714630 0.0013088751 -0.0001059070 0.0036002529 0.0075636899 -0.0182890845 -0.0168344483 0.0095979888 0.0113657217 -0.0031542616 0.0018108581 0.0043052660 0.0005655398 -0.0204668273 0.0090631274 0.0171013127 0.0112895997 -0.0071588902 -0.0102803043 0.0024244921 -0.0089263779 -0.0048047360 0.0055943629 0.0116151193 0.0004087541 -0.0154072555 -0.0043301561 0.0108071524 0.0177771134 -0.1029366159 -0.0409943739 0.0437829016 -0.0261687197 -0.0356607642 0.0037444171 0.0922080795 0.0312910521 -0.0032535730 -0.0098265239 -0.0004208928 0.0087091193 0.0089052223 -0.0055097059 -0.0206721837 0.0334157056 0.0152145722 0.0160358706 -0.0187769902 -0.0099856349 0.0008410000 -0.0025699680 -0.0007006467 -0.0040411956 -0.0014450292 0.0013842373 -0.0006970916 -0.0013174563 -0.0003213900 0.0027946048 0.0061397754 -0.0001742564 -0.0076354888 -0.0002428907 0.0031950678 -0.0616176615 0.0335725278 0.0326776227 0.0034020374 0.0397810719 0.0102913030 0.0164836018 -0.0023245406 -0.0090069471 -0.0080444246 0.0107406787 0.0042660109 -0.0113019318 -0.0098519572 0.0040433401 0.0018560331 0.0110906474 0.0012704233 0.0022598063 -0.0554535402 -0.0376354019 0.0013648446 0.0011844803 0.0006014887 0.0010071315 0.0125687550 0.0027744840 -0.0060037232 0.0079931289 0.0068066111 0.0031050208 -0.0008033614 -0.0015476082 -0.0005417198 -0.0000194475 0.0000771897 -0.0000100436 -0.0001188819 -0.0001472230 0.0004442990 0.0001365617 -0.0001473733 -0.0000540102 0.0000559264 -0.0000037816 -0.0091274496 -0.0110783924 -0.0030198589 0.0225772033 0.0095692632 -0.0029747324 0.0014650672 -0.0000611015 -0.0000280601 0.0004906753 -0.0012075573 -0.0002260407 -0.0005049397 0.0013978596 0.0008336140 -0.0050086325 -0.0032741928 0.0031786175 0.0008158807 -0.0014453352 -0.0022074513 0.0000971539 0.0007410811 -0.0007177121 -0.0007267262 -0.0008316127 -0.0009834126 0.0004148723 -0.0009498748 0.0001967889 0.0008695169 -0.0002619002 0.0000577177 -0.0550404418 0.0435898063 0.0212710870 -0.0027331499 -0.0971531550 -0.0569105773 -0.0416072097 0.0266000872 0.0553786136 -0.0024437115 -0.0114237894 -0.0129123971 -0.0720032937 0.0286250501 -0.0059092504 0.0487590339 -0.0232285642 0.0068642599 0.1128459809 -0.0372304462 -0.0063883845 0.0393623524 -0.0126105175 0.0088338326 -0.0444020135 0.0250681524 0.0091627038 -0.5388937619 0.0671133140 -0.1994857732 0.3179099576 -0.2451081831 -0.1654177177 -0.0127114483 0.0034939602 -0.0002644023 0.2097780971 -0.0205741286 0.0731291948 -0.3831639064 0.3692729629 0.1997333945 -0.0018277453 -0.0011478331 -0.0007134098 0.0008532590 0.0008999207 0.0009873148 0.0047346575 0.0025742242 0.0017724008 0.0016837262 0.0009141658 -0.0000818713 -0.0021001686 -0.0015098978 -0.0007926334 -0.0229289275 -0.0100819600 0.0038414671 0.0054120459 0.0039618562 0.0069779141 -0.0006592538 -0.0000702116 0.0000035818 0.0100864541 0.0048269811 -0.0020102389 -0.0152439285 -0.0123276290 -0.0184971425 -0.0069651583 0.0182680406 0.0262184035 -0.0211863559 -0.0092462732 -0.0223479678 0.0001054310 -0.0008984960 -0.0015873796 -0.0012556512 0.0001627080 0.0009706250 0.0010276575 0.0000486271 -0.0001518910 -0.0001887498 -0.0001339583 0.0001217055 -0.0004100131 -0.0001118017 0.0000694673 -0.0005262028 -0.0002364216 0.0001883225 -0.0075535653 0.0004954303 0.0010734631 0.0003537805 -0.0019049702 0.0007091742 0.0007234750 0.0004665629 -0.0002754230 -0.0003714089 -0.0003169259 0.0001393133 0.0064382601 -0.0003495218 -0.0017782521 -0.0029248999 -0.0039162559 0.0021861385 0.0007068320 0.0000637863 0.0011417710 -0.0002748831 -0.0002038176 -0.0002295786 0.0003852518 -0.0001847347 0.0007658034 -0.0005081555 -0.0002616462 -0.0006220808 0.0012202379 0.0002573086 0.0021479625 -0.0016414834 0.0034761983 -0.0052612953 -0.0001359469 0.0000598950 -0.0002828783 0.0000458136 0.0000532218 0.0000139509 -0.0003685696 -0.0000023853 -0.0004466312 0.0005967648 0.0011996368 -0.0000196144 0.0009019687 -0.0063419913 -0.0010413495 -0.0230591499 -0.0068013097 0.0006890175 0.0080435072 0.0084247360 0.0015821550 -0.0156442987 -0.0005726898 0.0063305027 -0.0009463551 -0.0068211741 -0.0016249032 0.0093938951 0.0128791581 -0.0012241572 -0.0086318510 0.0105934464 0.0122383075 0.0226037302 -0.0035365833 -0.0109562760 0.0002761093 -0.0001637565 0.0007974818 -0.0002567192 0.0001277590 0.0006972151 0.0002450396 -0.0001491018 -0.0001725966 -0.0000151004 0.0000110781 0.0000101514 0.0007968930 0.0004621493 -0.0003173821 0.0003765166 -0.0003175885 0.0007990531 0.0002707121 0.0005320691 -0.0001396345 -0.0000585770 0.0002952684 -0.0003774367 -0.0003699566 -0.0007104628 0.0000171348 0.0005397425 -0.0000640036 -0.0008478202 0.0001705903 0.0000126821 -0.0003476921 0.0000870055 0.0002445633 0.0003143921 -0.0002983817 0.0007066498 -0.0024799429 -0.0006855071 -0.0005115582 0.0009120609 0.0009012064 -0.0009844484 0.0037342145 -0.0018847276 0.0014889797 0.0083935028 0.0000104098 0.0001372679 -0.0005462134 0.0004459822 0.0000583084 -0.0001047740 0.0008208803 -0.0002011757 -0.0005725004 -0.0000759911 -0.0001246073 -0.0002133925 -0.0001794853 -0.0000702655 0.0002221566 -0.0004439325 -0.0000267196 -0.0001194821 -0.0003910228 -0.0005491893 0.0006357866 0.0004611217 -0.0000418898 0.0007844182 0.0008276359 -0.0003997135 -0.0018825413 0.0014858664 0.0013000194 0.0041511498 -0.0005311257 -0.0002357838 0.0000329964 0.0015359258 0.0012038036 0.0006692560 0.0053158599 -0.0027843402 0.0143993518 -0.0008166630 0.0002343207 -0.0008469636 -0.0010328815 0.0002959597 0.0009348329 -0.0000887754 -0.0001507930 0.0002243332 0.0003971449 0.0005686535 0.0001469687 0.0015472952 -0.0003479340 -0.0007207257 -0.0007823933 0.0003103163 0.0000337563 -0.0015087920 0.0006394911 -0.0007012739 0.0005279048 0.0074882050 0.0006979412 0.0130882042 -0.0079192917 -0.0072014203 -0.0003042265 -0.0025223255 0.0014417160 -0.0094602303 -0.0036763500 0.0006000457 -0.0000516523 0.0006475474 0.0001487492 -0.0014993386 -0.0056077317 -0.0030610645 0.0006444130 0.0005411457 0.0001180683 -0.0121443267 -0.0662252316 -0.0247772521 0.0344998354 -0.0456269127 -0.0398658662 -0.0186445481 0.0037386054 0.0091595018 0.0018454696 0.0009775800 0.0003953823 0.0002475204 0.0000215114 0.0001855062 -0.0000916435 -0.0000067227 -0.0001862950 0.0008213762 0.0000619560 0.0000118719 0.0558383112 0.0649076164 0.0174268285 -0.1350582622 -0.0566905675 0.0185325833 -0.0003597530 0.0013286706 -0.0008076383 -0.0004120561 0.0017463870 0.0000071172 -0.0003663626 0.0000708978 -0.0002180586 -0.0004024742 -0.0001682572 0.0015913958 0.0004336672 -0.0006730359 0.0018766309 0.0005098930 -0.0001912166 -0.0000899005 -0.0007003681 -0.0012637923 0.0004294390 0.0001103316 0.0013863329 0.0007517481 -0.0023244372 0.0002448625 -0.0007084969 0.3290804102 -0.2634055086 -0.1305153007 0.0159539878 0.5831394988 0.3399268751 0.2495335363 -0.1600711784 -0.3313123313 -0.0003566143 -0.0022204327 -0.0024540919 -0.0135596188 0.0053914439 -0.0013515203 0.0092463183 -0.0045160266 0.0011833677 0.0208606879 -0.0068742972 -0.0011617384 0.0073338518 -0.0022399459 0.0017758872 -0.0081960370 0.0047501179 0.0018891059 -0.1029371430 0.0115436871 -0.0370457624 0.0608371660 -0.0471651398 -0.0318660334 -0.0024244430 0.0007234380 0.0000677151 0.0404809893 -0.0037154651 0.0143129396 -0.0723058264 0.0700333336 0.0379314736 -0.0043199729 -0.0025070130 -0.0017852292 0.0029433770 0.0020093994 0.0020801553 0.0084527027 0.0047020351 0.0033178801 0.0030335127 0.0018207908 0.0000966807 -0.0037889893 -0.0025775498 -0.0012873733 -0.0446309369 -0.0200000402 0.0069477077 0.0145154642 0.0123871392 0.0179545028 -0.0008622471 -0.0005738354 -0.0003562985 0.0223699890 0.0094280525 -0.0039132975 -0.0255983958 -0.0207259326 -0.0305751577 -0.0013052616 0.0032337586 0.0046504780 -0.0038832181 -0.0016297535 -0.0039874884 0.0001494765 -0.0014930354 -0.0026383217 -0.0022866946 0.0002378534 0.0017087122 -0.0002805753 -0.0000771193 0.0000812055 -0.0008590491 -0.0000472603 0.0001727618 0.0002430405 0.0000491615 -0.0000657478 0.0000327221 0.0000384553 -0.0000161384 0.0002525977 0.0000565183 -0.0000729721 0.0006691587 -0.0011284952 0.0003138246 -0.0002692236 -0.0001586385 0.0000879669 0.0003947344 -0.0000221609 -0.0000574503 -0.0021725650 0.0000984137 0.0006725870 0.0029633518 0.0035812960 -0.0019246485 0.0000413970 0.0002200191 -0.0001257850 -0.0000453498 0.0001820038 -0.0001854905 -0.0002287646 -0.0000664106 -0.0002992415 0.0000800465 -0.0001063372 0.0002015991 -0.0022706386 -0.0011322968 -0.0031626043 0.0005450129 -0.0017624934 0.0022694980 0.0002005258 0.0000783579 0.0002491702 -0.0000577668 -0.0001197625 0.0000177431 0.0021466523 0.0008789803 0.0025061740 -0.0006692727 -0.0014013855 0.0000498687 -0.0027247945 0.0331249549 0.0120080283 0.1344731271 0.0537290135 -0.0120192716 -0.0411035434 -0.0401966090 -0.0221437469 0.0754688771 -0.0143233475 -0.0376609785 0.0039965214 0.0363347934 0.0138727002 -0.0147442533 -0.0767835396 -0.0165616653 0.0436506238 -0.0571723502 -0.0633718985 -0.1307190488 0.0260563592 0.0554131459 0.0003142969 -0.0003955110 0.0013962447 0.0022863795 0.0002260146 0.0010758028 0.0004871506 -0.0001077701 -0.0003755625 0.0001274164 0.0007908998 -0.0004572640 -0.0001105962 0.0007551291 -0.0002933004 -0.0004606721 -0.0003952080 -0.0003698534 -0.0002007470 -0.0007050493 0.0002021464 0.0000355048 0.0000623365 -0.0000276210 0.0003654257 0.0004926639 0.0001495617 -0.0015371451 -0.0000082525 -0.0007144417 0.0006347567 -0.0002898438 0.0003366527 0.0003389364 0.0000292713 0.0000812817 -0.0017294535 -0.0003059198 0.0000912115 0.0022798194 0.0010929580 -0.0016353797 0.0007057004 -0.0021697320 0.0019866292 -0.0928099921 0.1434480016 0.1501739853 -0.0669399284 -0.0742294777 0.0201257356 -0.0042230009 -0.0198844418 -0.0048496540 0.1208886074 -0.0563846275 -0.1050590416 -0.0546730699 0.0341441525 0.0486223916 -0.0148082299 0.0514386827 0.0283018760 -0.0283243440 -0.0681959429 -0.0057419257 0.0656401520 0.0153113870 -0.0383030987 -0.0842556404 0.4965794887 0.1986437153 -0.2295917873 0.1416847037 0.1851501757 -0.0181571650 -0.4358134706 -0.1467846606 0.0265722317 0.0523636968 -0.0040442978 -0.0445679281 -0.0452376600 0.0269129067 0.0728637835 -0.1450393076 -0.0602993783 -0.0813159356 0.0986157191 0.0532094535 -0.0045057867 0.0080089519 0.0030302659 0.0071002841 0.0169326294 -0.0003065449 -0.0012319880 0.0244908017 0.0030996837 0.0012515914 -0.0433839605 -0.0067594915 0.0384212437 -0.0108139757 -0.0174305209 0.2002258399 -0.0976534633 -0.1045948845 -0.0061532897 -0.0078943139 -0.0004880361 0.0807759217 -0.0987715969 -0.0450799103 0.0348605647 -0.1843486598 -0.0410465268 0.0154675341 0.0184590833 -0.0045510150 -0.0175436566 -0.0377078816 0.0023975308 -0.0299436034 0.0986836156 0.0050243387 -0.0000600509 -0.0000920557 0.0000051796 0.0057118651 -0.0048248969 0.0087142813 -0.0010525070 0.0017587112 0.0024942238 0.0009096900 0.0001844722 -0.0005365296 -0.0000422089 0.0001770415 0.0001852014 -0.0000470412 0.0001659957 -0.0001237813 0.0002205168 0.0004085585 -0.0025280265 -0.0000963494 -0.0002307083 -0.0000045702 -0.0030726444 -0.0023413993 -0.0010510237 0.0064029401 0.0022146792 -0.0007677142 -0.0004120897 -0.0016847697 0.0011817964 -0.0006081374 0.0005740344 0.0011757809 0.0013462791 -0.0018230625 -0.0009190314 -0.0015437768 0.0004769202 0.0110236074 0.0018861997 -0.0001253837 0.0108010431 -0.0026682512 -0.0061438844 0.0038955340 -0.0000190800 -0.0001990888 -0.0002260793 -0.0000250241 -0.0003282398 -0.0000052447 0.0003727427 0.0010221611 0.0006214537 -0.0157371478 0.0118435919 0.0059956999 -0.0007913121 -0.0270460728 -0.0161997934 -0.0117369689 0.0087251299 0.0157614944 -0.0003329616 -0.0036531400 -0.0038478926 -0.0210381813 0.0080155723 -0.0024522150 0.0144782834 -0.0067699769 0.0014153750 0.0291082152 -0.0094658243 -0.0013334776 0.0099947799 -0.0026441917 0.0029631280 -0.0107048313 0.0067430323 0.0032367280 -0.1530996347 0.0161675246 -0.0543165498 0.0938627727 -0.0765238372 -0.0478447682 -0.0031763184 0.0008985216 0.0002842340 0.0566079019 -0.0046597294 0.0206682493 -0.1035968546 0.1016784572 0.0554800080 0.0035806413 0.0020484025 0.0011774421 -0.0021043439 -0.0018475346 -0.0017527302 -0.0074494121 -0.0039495766 -0.0027339151 -0.0036549076 -0.0020675913 -0.0003968013 0.0039743263 0.0027156446 0.0014105669 0.0377938847 0.0168873979 -0.0062438837 -0.0134360623 -0.0103139182 -0.0170723335 0.0019256911 -0.0000547718 -0.0005217033 -0.0245090984 -0.0117625122 0.0045337971 0.0256513783 0.0202730383 0.0303913444 -0.0018985926 0.0045894778 0.0064024228 -0.0056839882 -0.0021266265 -0.0056418877 0.0001212302 0.0012067709 0.0022849156 0.0012282620 -0.0001386921 -0.0007051536 -0.0006438376 0.0000782189 0.0000935000 -0.0002945145 0.0003923446 -0.0000974450 -0.0000489568 -0.0000082887 -0.0000062082 0.0001479437 0.0000441714 -0.0000386538 -0.0021053260 0.0002066891 0.0002842532 0.0019771213 -0.0033475946 0.0009992619 0.0003221188 -0.0000902048 -0.0000632344 -0.0000517007 -0.0000794014 0.0000327204 0.0004015156 -0.0000198384 0.0001338873 0.0008755183 0.0012376510 -0.0005647274 0.0001110920 -0.0002979016 0.0004051857 -0.0000595093 -0.0003272608 0.0001803999 0.0003186958 0.0000817621 0.0004069519 -0.0001878483 0.0000251287 -0.0003179266 0.0022348654 0.0011656468 0.0032979876 -0.0007903066 0.0020847907 -0.0028791142 -0.0002188787 0.0000104337 -0.0003674206 0.0001039774 0.0001533386 0.0000282362 -0.0023635684 -0.0008561977 -0.0028321768 0.0009013539 0.0017972272 -0.0000255651 -0.0022460680 0.0024505834 -0.0056471066 -0.0038315885 -0.0149883564 0.0080283665 -0.0036422934 -0.0058134757 0.0116528898 0.0141650362 0.0153670410 0.0007400551 0.0006493690 0.0015901057 -0.0041450800 -0.0308020988 0.0040548041 0.0185654689 0.0043796617 -0.0003851636 -0.0021470900 0.0053397677 -0.0070155145 0.0062879083 -0.0017216401 -0.0010747340 0.0003517914 0.0362152356 -0.0042253545 -0.0020289172 -0.0000487086 -0.0008962349 0.0002254401 0.0023533199 0.0005188940 -0.0003996819 -0.0001802682 0.0000779364 -0.0000383362 -0.0002576605 -0.0003411924 -0.0001779668 -0.0004670046 0.0000365288 -0.0000787052 0.0000558071 0.0001008165 0.0000376723 0.0001623617 -0.0001065515 0.0002912945 -0.0031609659 -0.0012294625 -0.0033612214 -0.0000144478 -0.0000235982 0.0000799031 -0.0004074195 -0.0003112324 -0.0001777544 0.0005548948 0.0002372160 0.0004812436 -0.0007881150 -0.0005010530 0.0005844211 -0.0003834012 0.0003271478 -0.0017123570 -0.0669422664 0.0571149450 0.0929717386 -0.0205324123 -0.0179677821 0.0064097095 0.0000402346 -0.0005371703 -0.0001173602 0.0135959403 -0.0005193917 -0.0090992932 -0.0023539305 0.0022807600 0.0022167338 -0.0030396844 0.0058703630 0.0041547822 -0.0022101414 -0.0135892799 -0.0037457460 0.0039103974 0.0068343233 0.0000843336 -0.0039613267 0.0390351231 0.0147607545 -0.0372089244 0.0201880152 0.0285965081 0.0005363281 -0.0785758180 -0.0265411001 0.0004483800 0.0015289393 -0.0006719342 0.0123816984 0.0197145029 0.0002047397 -0.1195689165 0.1244635888 0.0869493023 0.0390106173 -0.0385249432 -0.0254965122 -0.0012854265 -0.0129879727 0.0003212716 -0.0326894810 0.0043856403 0.0143801811 -0.0099100846 0.0447692993 0.0084231943 0.0440063242 -0.0173246905 -0.0224375729 -0.0254451217 -0.0221726990 0.0078179682 -0.3756968750 0.2174761733 0.1936622586 0.0139934214 0.5399087444 0.1024438446 0.4356660603 -0.2725507875 -0.2197223853 -0.0369521371 -0.2179686160 -0.0207511137 -0.1218815976 -0.0839910172 0.0360599156 -0.0032917496 -0.0056563844 -0.0005434502 -0.0048228831 -0.0045938953 0.0196147946 -0.0001680298 -0.0000294953 -0.0000032952 -0.0044282315 -0.0002017780 -0.0061321596 0.0005522510 -0.0051367891 -0.0036197598 0.0036162455 0.0028751566 0.0008296252 0.0004609873 0.0002594525 -0.0003982301 -0.0004871337 -0.0004097171 0.0004135396 -0.0010772894 -0.0001880908 -0.0003943498 -0.0004340737 -0.0005756981 -0.0001572131 -0.0041259292 0.0031903946 0.0040833830 0.0023854474 -0.0029315794 -0.0027202646 0.0003907113 0.0010724184 -0.0004270096 -0.0009353696 0.0021328098 -0.0013449192 0.0014299243 -0.0016738712 0.0002401005 0.0048598154 0.0034785550 -0.0010013960 -0.0021917042 0.0055101415 0.0049966070 0.0009832627 -0.0077811760 0.0054496573 0.0003760409 0.0007797876 0.0017258556 -0.0000949829 -0.0008952955 -0.0010071863 -0.0002298111 0.0031791097 0.0015079699 -0.0082722428 0.0055891003 0.0049689995 0.0010926493 -0.0054598596 -0.0045809840 -0.0075249941 0.0032510184 0.0066852005 0.0028108546 -0.0005971817 0.0005062337 0.0048084418 -0.0011995462 0.0013815853 -0.0033612366 0.0018493481 0.0001434512 -0.0031732061 0.0011399395 0.0000891779 -0.0023856753 0.0004008566 -0.0008625247 0.0019546932 -0.0019207014 -0.0013096961 0.0318447461 -0.0022142739 0.0111729955 -0.0284238789 0.0244805511 0.0157332309 0.0024767813 -0.0015216704 0.0024131195 -0.0263701273 0.0016008718 -0.0106965532 0.0198004304 -0.0201388163 -0.0114522181 0.0003398717 0.0002047826 0.0001161033 -0.0001958244 -0.0001182418 -0.0001064707 -0.0009410498 -0.0004883629 -0.0002616808 -0.0003392825 -0.0001831371 -0.0001565161 0.0004715749 0.0002568205 0.0000624019 0.0031391164 0.0013321292 -0.0004492948 -0.0003753452 -0.0006813248 -0.0004265325 0.0000561647 -0.0000705733 0.0000431846 -0.0009389358 -0.0010549468 0.0001520354 0.0022869655 0.0019434290 0.0025178851 -0.0003573931 0.0019146869 0.0017974534 -0.0026299813 -0.0008112149 -0.0035360830 -0.0000241590 0.0002001380 0.0003801391 0.0003385545 -0.0000037413 -0.0002829915 -0.0078320386 0.0001930271 0.0012481422 -0.0023737004 0.0020153244 -0.0003922514 0.0009573491 0.0011019293 -0.0006068617 0.0018026317 0.0011311445 -0.0007206396 0.0100925170 0.0006922956 -0.0019648692 0.0108545441 -0.0155009634 0.0041187133 0.0009603655 -0.0013185411 0.0001701767 0.0001665801 -0.0003060320 0.0000965325 -0.0064846489 -0.0001658027 0.0026021706 0.0087621562 0.0117722048 -0.0059603314 0.0001218971 -0.0001774309 0.0001008708 0.0004944762 -0.0000889036 0.0007754683 -0.0000179842 0.0000500063 -0.0000440314 -0.0000102073 0.0000425371 -0.0000409928 0.0011506952 0.0006891315 0.0015933984 -0.0001746542 0.0007522405 -0.0009832403 -0.0001000635 0.0001877153 -0.0002798474 -0.0000224599 0.0001205062 -0.0001253969 -0.0018622864 -0.0006079538 -0.0026045414 -0.0005799790 -0.0010085231 -0.0001173055 0.0002564176 -0.0008814140 0.0033317951 0.0070326741 0.0118581396 -0.0065995076 0.0010674591 0.0042404622 -0.0083721311 0.0035721084 -0.0031656847 0.0008057277 0.0019103492 0.0003928774 0.0029023197 0.0093610296 -0.0057092616 -0.0048043821 -0.0037524858 -0.0028780290 -0.0072692461 -0.0087793745 0.0057517428 -0.0022735344 -0.0287720649 -0.0207956092 0.0121620626 0.7126672994 -0.0918477717 -0.0307298099 0.0028151404 -0.0270901364 0.0062865240 0.0545381115 0.0088349586 -0.0101570471 0.0076975145 0.0223868892 -0.0104703658 -0.0071530060 -0.0120789824 -0.0016298329 0.0014116523 -0.0007444426 0.0138825457 0.0042275877 0.0070615193 -0.0011699148 -0.0031375669 0.0016764609 -0.0041728125 0.0779111376 0.0391908539 0.0765623207 -0.0018489479 0.0015625601 0.0004943703 -0.0159741567 -0.0059305378 0.0013040288 0.0020761413 -0.0005443316 0.0003281619 -0.0009062614 0.0003007716 0.0008331592 -0.0003613597 0.0009364216 -0.0004210725 0.0037701115 -0.0038999096 -0.0070493331 0.0010017395 0.0003966111 0.0000516019 -0.0000076830 -0.0000638164 -0.0000623378 -0.0016001213 0.0004308413 0.0012305582 0.0005381189 -0.0002565568 -0.0003451364 0.0003450102 -0.0006127499 -0.0004640303 0.0001779463 0.0011735689 0.0003270427 -0.0003528661 0.0002157876 0.0002223948 0.0004682716 -0.0052467670 -0.0026971728 0.0036125145 -0.0020001355 -0.0027381054 -0.0000853788 0.0063053425 0.0021040043 -0.0001889695 -0.0004986342 0.0000886860 -0.0003654773 -0.0009309510 -0.0002154823 0.0068406639 -0.0065683171 -0.0055377431 -0.0019046326 0.0018420355 0.0012462602 0.0001485776 0.0007401823 -0.0000692742 0.0018906335 -0.0002778468 -0.0008376741 0.0007127644 -0.0030510420 -0.0005092517 -0.0028874407 0.0014227473 0.0014850129 0.0014293544 0.0013394547 -0.0004231471 0.0215936504 -0.0125467836 -0.0111690392 -0.0011101688 -0.0337615719 -0.0071586199 -0.0278226988 0.0177461859 0.0142791793 0.0021508281 0.0141675683 0.0014398269 0.0078287020 0.0052668438 -0.0023141152 0.0000478468 0.0002557903 0.0002120580 0.0007149272 0.0003746404 -0.0071108592 0.0142475255 0.0101357553 0.0049346636 0.0003578256 0.0003119045 0.0004286670 0.0002643722 0.0006283528 0.0003064872 -0.0002408062 -0.0002590024 -0.0001639826 -0.0001770415 -0.0000663102 0.0001439239 0.0006516655 -0.0006331522 0.0000307839 -0.0001479679 -0.0005450727 0.0009337419 0.0001101525 0.0002300518 0.0000351120 -0.0000064904 -0.0003704548 -0.0002412652 0.0002276721 0.0003107553 0.0000786576 -0.0019436341 0.0016213368 -0.0021946596 -0.0007700297 0.0024573943 0.0001841760 -0.0031644046 0.0029733381 0.0009231683 0.0031285878 0.0014287028 -0.0037080935 -0.0014563536 0.0016162956 -0.0049483256 0.0022090645 0.0033966378 -0.0030502754 -0.0002840804 -0.0002863646 -0.0003721817 0.0002588898 -0.0001043159 -0.0004191408 -0.0004500023 -0.0015199780 -0.0008481246 -0.0004279646 0.0006416843 0.0003443948 -0.0000630867 -0.0011829668 -0.0005516767 -0.0002885820 0.0003061493 0.0005554738 0.0651536729 -0.0364461922 -0.0036258820 0.0114421454 -0.0062345807 -0.0022097519 -0.0228703286 -0.0022159220 -0.0128326374 -0.0063172409 0.0023156389 0.0001866449 -0.0116487921 0.0190793258 0.0165472834 0.0135121851 -0.0021716409 0.0040404723 -0.0545136844 -0.0024411866 -0.0327096737 -0.0483303802 0.0203034721 -0.0003779966 0.0015795889 -0.0005652994 -0.0003844845 -0.0710140465 0.0239939639 -0.0060306099 -0.0592261744 0.0748664266 0.0497250990 0.0027630375 0.0017458340 0.0020106691 -0.0062706611 -0.0023103915 0.0025866412 -0.0029148260 -0.0016982081 -0.0014336317 -0.0028745276 -0.0031481281 -0.0059562280 0.0041759528 0.0020413172 0.0009304051 -0.0118700537 -0.0026342735 0.0055907006 -0.0142196773 -0.0087251236 -0.0074422012 0.0004215186 0.0002314112 0.0002421174 -0.0194701371 -0.0103862338 -0.0027404481 -0.0031086851 -0.0030329228 -0.0100642564 0.0009141068 -0.0009672303 -0.0011205781 0.0017628262 0.0002606539 0.0011214748 0.0000801215 0.0006261332 0.0009899327 0.0009500669 -0.0000358760 -0.0006134653 -0.1731791010 0.0089237904 0.0252944180 -0.0596171884 0.0431380825 -0.0064881913 0.0216727377 0.0223954364 -0.0127254240 0.0385654418 0.0261444013 -0.0161014682 0.2192328790 0.0133173710 -0.0422812847 0.2333205275 -0.3310744862 0.0877027371 0.0201630959 -0.0301126007 0.0043066375 0.0039303016 -0.0082832005 0.0025235449 -0.1325450519 -0.0068691247 0.0555427447 0.1985827776 0.2646849906 -0.1339371480 -0.0088679336 -0.0153036681 -0.0057509871 -0.0217486498 -0.0090303115 -0.0236721609 0.0060046262 0.0080238083 0.0040944918 -0.0005233171 0.0022694945 -0.0021044993 0.0008062392 0.0063538291 -0.0029518798 0.0121997505 -0.0355397234 0.0427451854 0.0014622615 -0.0019783679 0.0033933567 0.0034315083 -0.0031561607 0.0078110597 0.0064521115 0.0000861530 0.0124139670 0.0459466867 0.0828012860 0.0056376927 -0.0000033990 -0.0001399689 -0.0002717953 -0.0011025898 -0.0009769096 0.0004111350 0.0001121148 -0.0001378754 0.0006446290 -0.0005782244 0.0003021860 0.0002015683 -0.0002899525 -0.0002489300 -0.0001497639 -0.0000569919 0.0010725945 0.0002289967 0.0000140990 0.0003421208 0.0007847265 0.0015597263 -0.0002568920 -0.0004980369 0.0055453306 0.0038561337 -0.0022458118 -0.1322261545 0.0151426699 0.0065005725 0.0034032514 0.0028932947 -0.0008069184 -0.0111888711 0.0002451036 -0.0070193319 -0.0168734736 0.0001630403 0.0025347795 0.0036243875 -0.0258205235 0.0305612777 0.0409658840 0.0036711246 0.0509714529 0.0087101257 0.0230144411 -0.0117944533 -0.0188969814 0.0117593585 -0.0277609871 0.4647813274 0.2164141981 0.4644007233 -0.0164859174 0.0046569779 -0.0229059827 0.0092500021 0.0016247476 -0.0029988207 -0.0004797469 0.0005761058 0.0019017859 0.0021569509 -0.0002752418 -0.0022451610 0.0011750594 -0.0014724491 -0.0002961295 -0.0018485499 0.0016971050 0.0024026128 -0.0007116680 -0.0017468355 0.0013213974 0.0000508531 -0.0001531412 -0.0001831014 0.0009401687 -0.0002845746 -0.0007789724 -0.0002433803 -0.0001343370 0.0002801667 -0.0000298261 0.0003585021 0.0002479804 -0.0002126347 -0.0004700955 -0.0000570913 0.0002676936 0.0003710665 0.0000181528 -0.0011213215 0.0034359311 0.0002121746 -0.0005788129 0.0006757292 -0.0004886151 -0.0000638754 -0.0017962606 -0.0003605890 -0.0001805633 0.0003447196 0.0001855651 0.0003915470 0.0000759692 0.0002238886 -0.0020461875 0.0021290258 -0.0002214903 0.0003654769 -0.0002925262 -0.0003309169 -0.0000448540 -0.0002014288 0.0000195968 -0.0005716616 0.0000891652 0.0002832195 -0.0001704058 0.0009639582 0.0001659802 0.0008433774 -0.0005119633 -0.0004481017 -0.0003395762 -0.0004132961 0.0000950872 -0.0062427034 0.0036134209 0.0030692437 0.0002482285 0.0098242062 0.0018694133 0.0082415071 -0.0053643028 -0.0042311985 -0.0005827777 -0.0046471912 -0.0005515083 -0.0021973544 -0.0014685138 0.0006460430 -0.0006522061 -0.0002270839 0.0001135963 0.0009851722 -0.0006575774 -0.0027617496 0.0690080323 0.0419854460 0.0191810462 -0.0004312432 -0.0003622669 -0.0004988982 -0.0000460721 -0.0007172681 -0.0003683997 0.0005778238 0.0004754149 0.0001008471 0.0001154797 0.0000736848 -0.0000731252 0.0000876612 -0.0001717512 0.0000671742 -0.0001614173 -0.0000161265 -0.0001130772 -0.0001121823 -0.0001060569 -0.0000154256 -0.0007383636 0.0002870739 0.0004857911 0.0006336784 -0.0002007908 -0.0003885702 -0.0017691067 0.0001090745 -0.0006870449 -0.0007677988 0.0013572513 0.0008662055 0.0004207435 -0.0001009204 0.0002593561 0.0008819191 0.0007312961 0.0005339365 -0.0001873637 0.0004517841 0.0009395319 -0.0002787054 -0.0010276483 0.0007532991 0.0001968969 0.0002371106 0.0001847882 -0.0000307109 -0.0001682441 -0.0002323507 0.0001533359 0.0004551205 0.0002845658 -0.0017798058 0.0013465907 0.0009345855 0.0000988426 -0.0024362717 -0.0014121774 -0.0014897801 0.0007523852 0.0016057052 -0.0097208350 0.0047233662 0.0018521940 -0.0015823325 0.0008550299 0.0000767065 0.0030692893 0.0004535852 0.0017976683 0.0006934540 -0.0001786208 0.0000424067 0.0014356386 -0.0027523694 -0.0024801647 -0.0017004569 0.0001668130 -0.0010546767 0.0079257115 0.0005738525 0.0039316051 0.0062993419 -0.0028557024 0.0004757256 -0.0003010872 0.0000732180 0.0000656431 0.0093511802 -0.0034892078 0.0005660006 0.0106871832 -0.0139334112 -0.0082643599 0.0065745744 0.0055579011 0.0090991066 -0.0249074710 -0.0079775534 0.0137061086 -0.0041316411 -0.0028867872 -0.0038877208 -0.0108864450 -0.0123921675 -0.0251627506 0.0139411376 0.0083026252 0.0046822172 -0.1102859625 -0.0346358386 0.0358596869 -0.0522859781 -0.0310428884 -0.0205296369 0.0016665569 0.0008025441 0.0007326314 -0.0686211940 -0.0383984669 -0.0139891814 -0.0274588004 -0.0327738202 -0.0586733166 -0.0000874856 0.0000222619 -0.0000146875 -0.0001484501 0.0000249051 -0.0000233822 0.0006963787 0.0010569937 0.0013967009 0.0011416912 0.0001349957 -0.0003788344 0.0303078525 0.0028064823 -0.0062041318 0.0086510005 0.0012487331 0.0009974202 -0.0063626247 -0.0064183464 0.0035915440 -0.0059960671 -0.0053762863 0.0030188463 -0.0859812592 -0.0009697685 0.0150558927 -0.0285065552 0.0347009250 -0.0089342448 0.0026722664 0.0026615985 -0.0009802455 -0.0034809799 0.0000314202 0.0003409143 0.0642567098 -0.0067930678 -0.0193485387 -0.0427530865 -0.0547009174 0.0302674565 -0.0406059162 -0.0365841623 -0.0311897466 -0.1136449486 -0.0289226556 -0.1392598510 0.0155472507 0.0245795935 0.0077807686 0.0020778853 0.0069322737 -0.0010513264 -0.0995514322 -0.0378465428 -0.1623147215 0.0652833568 -0.1992161781 0.2528944613 0.0128288910 -0.0204578506 0.0337558601 0.0144436491 -0.0221419022 0.0398977550 0.1830465696 0.0525132611 0.2575535661 0.1876723340 0.3252866923 0.0323416964 0.0001388842 0.0001081812 0.0002411735 0.0009316575 0.0010040911 -0.0004734045 0.0002852415 0.0005920921 -0.0005988024 0.0001870898 -0.0002653620 -0.0000705587 -0.0000341001 0.0001690695 0.0003688873 0.0010745527 -0.0007213361 -0.0008961470 0.0001665875 -0.0011618696 -0.0011779299 0.0002380505 0.0005626872 -0.0001857356 0.0021341629 0.0661014014 -0.0228096472 -0.4097920947 -0.0097614271 0.0476559573 -0.0380229043 -0.0383942553 0.0175860907 0.0238347819 -0.0383298582 0.0074570526 0.0803177337 0.1105856547 -0.0485568775 -0.0247388131 0.0942685144 -0.1122901032 -0.0127134324 -0.0355950695 0.0030653711 0.0237384742 -0.0197418793 0.0543788606 0.0195495674 0.0590194950 -0.0431924952 0.3190468293 0.0906033898 0.3572581792 0.0361585855 -0.0203683797 0.0672072343 -0.0701483565 -0.0363805205 0.0165855936 0.0049581128 -0.0058760791 -0.0039181142 -0.0043343800 0.0037431375 0.0060443438 -0.0037535858 0.0058947690 0.0019339362 -0.0033368513 0.0027850562 0.0007006084 -0.0007563145 0.0008559931 -0.0020301782 0.0007565878 0.0003528908 -0.0001146578 0.0003658696 -0.0003821707 -0.0004925951 0.0005621898 0.0000460103 -0.0005227121 -0.0004578267 0.0001028932 0.0004355987 0.0001235634 -0.0006257739 -0.0003027243 -0.0013820056 -0.0002150764 0.0010506200 0.0016327720 -0.0052158442 -0.0009843027 -0.0032333127 0.0013353825 0.0013194949 -0.0000093233 0.0022820315 0.0005284680 0.0010264061 -0.0000298611 -0.0004220515 -0.0005266375 -0.0002762020 -0.0005255570 -0.0009396258 -0.0002626263 0.0031678575 -0.0002480539 0.0009023378 0.0004622779 0.0000230120 -0.0000592310 -0.0000197851 -0.0004782562 0.0001864832 0.0001748029 -0.0001675718 0.0009306373 0.0003253554 0.0004384629 -0.0007910202 -0.0003664156 0.0001182133 -0.0003640431 -0.0000969576 -0.0018101199 0.0010768943 0.0009243725 -0.0006604440 0.0052601802 -0.0002908869 0.0062311149 -0.0046239721 -0.0029818782 -0.0000309747 -0.0038960860 -0.0005950868 -0.0014358900 -0.0009622548 0.0004607409 0.0005932171 0.0009621411 0.0004467047 -0.0027889322 -0.0092498520 -0.0099139566 -0.0757478569 -0.0647442325 -0.0354097345 0.0021497454 0.0013738080 0.0001412344 0.0010458792 0.0014668583 0.0004914023 -0.0009134777 -0.0011183545 -0.0003905092 -0.0007513280 0.0002226919 0.0006323649 0.0005502648 -0.0006727021 0.0000454434 0.0006304955 0.0013181827 -0.0014039482 0.0005451132 0.0003980504 0.0002720333 0.0002751426 -0.0005215830 -0.0003681053 -0.0001192403 0.0003548100 0.0001770761 0.0038523875 0.0016133805 -0.0010144538 0.0012580222 -0.0003968327 -0.0030311062 -0.0052032111 0.0038758704 0.0008485714 -0.0106341566 -0.0053846438 0.0094875955 0.0041767965 -0.0119394483 -0.0005471367 0.0069576802 -0.0006349577 -0.0015331001 -0.0021919523 -0.0028813028 -0.0024924009 0.0012850864 -0.0012429453 -0.0013715695 -0.0016313712 -0.0024924405 -0.0015431598 0.0003350253 0.0005221718 0.0004519625 0.0000476563 0.0008535667 0.0005551152 0.0002043313 0.0002118418 -0.0001070914 0.0795414491 -0.0503630775 0.0132312686 0.0144177193 -0.0060055175 -0.0067249444 -0.0286469216 -0.0040292062 -0.0187833979 -0.0083809343 0.0062676921 0.0040642873 -0.0171140567 0.0237323160 0.0191204293 0.0220804888 -0.0087179653 -0.0033909331 -0.0974293883 -0.0101077488 -0.0461202726 -0.0623047302 0.0198865446 0.0001426711 0.0005224831 -0.0004050270 -0.0000030637 -0.0902663906 0.0294657113 -0.0081517170 -0.0662306725 0.0738053221 0.0563704152 -0.0267241167 -0.0129016075 -0.0057439076 0.0346215786 0.0129651028 -0.0140970069 0.0169237631 0.0080635743 0.0013953407 0.0133475143 0.0171278659 0.0354774409 -0.0209680881 -0.0074256532 -0.0030602999 0.0543618938 0.0207885285 -0.0285098773 0.0890431943 0.0545810936 0.0552997031 -0.0012100225 -0.0007596980 -0.0002954130 0.0865688880 0.0460243769 0.0235284794 0.0436391283 0.0405187889 0.0901536323 0.0019571313 -0.0027191119 -0.0035496362 0.0026976059 0.0009551294 0.0024771307 -0.0001210055 -0.0030511525 -0.0051379868 -0.0063578882 0.0000810931 0.0035602253 0.0030595557 -0.0233541431 0.0089807996 0.0185731236 -0.0520711355 0.0166158151 0.0134356860 0.0056620991 -0.0047967580 0.0002022421 0.0009707987 -0.0005680385 0.1961659153 -0.0101457298 -0.0257726344 -0.0431355150 0.0836959430 -0.0242028949 -0.0343655153 0.0188333222 -0.0038451094 0.0110403916 0.0109624629 -0.0049897094 -0.3123854038 0.0577574436 0.0616134416 0.0664422873 0.0899180298 -0.0518758328 -0.0417712544 -0.0791658533 -0.0027428882 -0.0158506989 -0.0304144457 0.0043151677 0.0249186137 0.0345664406 0.0104202926 0.0002802931 0.0187948030 -0.0129785211 0.2176582717 0.1317757729 0.2657140217 0.0052078397 0.0167602419 -0.0124766036 -0.0047140119 0.0049092328 -0.0124408743 0.0020684760 -0.0021572638 0.0044009315 -0.1604629642 -0.0591600539 -0.1909199058 0.0627372492 0.1215334891 0.0008777330 -0.0006415218 -0.0007721271 -0.0001592349 -0.0021428786 -0.0021819683 0.0009372149 -0.0005574985 -0.0006186701 0.0006964621 -0.0015989608 -0.0010601238 -0.0001743477 -0.0008746658 -0.0003834023 0.0000741389 0.0009772404 0.0010074268 -0.0006662349 -0.0017008951 0.0026477579 0.0029869650 0.0004795608 -0.0002917404 -0.0003208849 0.0001646827 0.0003487304 0.0000492358 -0.0042201628 0.0001162498 0.0006145292 -0.0001188154 -0.0002870828 0.0000888302 0.0001843088 -0.0001815510 0.0000369649 0.0007950918 0.0010293592 -0.0003914439 -0.0000676656 0.0003209349 -0.0003699650 -0.0000010121 -0.0001292314 0.0000208107 0.0000485798 -0.0000466446 0.0001295378 0.0000810152 0.0001693924 -0.0001058703 0.0008748229 0.0002071996 0.0008934464 0.0006257155 -0.0003484837 0.0003305471 -0.0003606426 -0.0002865861 0.0001058148 -0.0018013026 -0.0003430434 0.0006049675 0.0024150004 0.0010267008 -0.0015362533 0.0008855381 -0.0015049217 0.0002354602 -0.1277612715 0.1229325176 0.1909890413 -0.0286757744 -0.0269196579 0.0096449031 -0.0062502873 -0.0078683685 0.0010305250 0.0578706875 0.0154726273 -0.0334276602 -0.0244608432 0.0084704500 0.0195009769 -0.0066499472 0.0108996070 0.0082612918 -0.0237335628 -0.0348620703 0.0023832984 0.0476424745 0.0209666158 -0.0262475194 -0.0387209282 0.2274782301 0.0899813192 -0.0502258953 0.0285828077 0.0387076900 -0.0163679192 -0.3203151558 -0.1005863687 -0.0061331627 0.0270518981 0.0150815273 0.0102340793 0.0623910837 0.0019415983 -0.3372124972 0.3303172220 0.3304746564 0.1063982416 -0.1173817605 -0.0759487157 0.0027166998 0.0096507148 -0.0004998415 0.0062651609 -0.0319651041 -0.0063036068 0.0057442578 -0.0781651164 -0.0109230478 -0.0096468293 0.0708441940 0.0151670482 -0.0483648310 0.0076661638 0.0211124837 -0.1654925757 0.0656124027 0.0811435922 0.0015307152 -0.1953321539 -0.0442318156 -0.2647142689 0.2438379771 0.1391821409 -0.0408026134 0.3299934740 0.0647754866 -0.0030840190 0.0094682842 0.0060920919 -0.0142942706 -0.0318677267 0.0001929886 -0.0198307235 0.0878837241 0.0303258127 -0.0002266952 -0.0002292628 -0.0002497681 -0.0005719733 0.0032987102 -0.0135215670 0.0020267490 -0.0076368523 -0.0062599259 0.0041334738 0.0033761526 0.0012557306 0.0002112348 0.0001618808 -0.0002583793 -0.0007369683 0.0002308040 0.0000133991 -0.0006836490 0.0004101586 -0.0007421480 -0.0005486847 0.0002107257 0.0007734963 -0.0060187951 0.0060537998 0.0070961013 0.0022235728 -0.0049169466 -0.0039070661 0.0018680946 -0.0005868735 0.0012264978 -0.0001998216 -0.0003879597 -0.0006097712 0.0024028154 -0.0020521938 -0.0002336879 -0.0016357086 0.0006390061 0.0094799185 0.0018511794 -0.0071120764 0.0022385881 0.0044587874 -0.0022692455 -0.0001397318 -0.0004614636 -0.0004712214 -0.0017763200 0.0013557397 -0.0029312980 -0.0038929550 -0.0000071108 -0.0009128488 0.0002534981 -0.0080636969 0.0040731970 0.0044680713 0.0017190792 -0.0055511381 -0.0039350667 -0.0075069386 0.0024720394 0.0056390342 0.0002983167 -0.0005309351 -0.0001794405 -0.0027869636 0.0007643000 -0.0009475569 0.0017479634 -0.0010284760 -0.0005132715 0.0014571378 -0.0002045752 0.0003523204 0.0002061010 0.0004150456 0.0007367745 0.0000814086 0.0003209430 0.0005612908 -0.0158986985 -0.0004668488 -0.0039760307 0.0122296307 -0.0130227610 -0.0060569307 -0.0011799829 0.0007614785 -0.0011720086 0.0071192857 0.0003992542 0.0033568340 -0.0092632746 0.0103282096 0.0058072327 -0.0000131856 -0.0000382063 -0.0000597505 0.0002343456 0.0000877400 -0.0001303101 -0.0002874089 -0.0001163723 -0.0000391526 -0.0004264219 -0.0001432767 0.0000791241 0.0002802031 0.0002407965 0.0001331380 0.0008174491 0.0005922624 -0.0003390633 0.0000737207 -0.0007997414 -0.0006031222 0.0002192727 -0.0000458309 -0.0000662537 -0.0010313172 -0.0011964840 0.0005182041 0.0022553298 0.0015341822 0.0027455925 0.0003061039 -0.0009476343 -0.0007075625 0.0012089497 0.0002982175 0.0014899000 0.0000594467 -0.0000210227 0.0000153523 -0.0000547530 0.0000285256 0.0001003643 0.0001241344 -0.0001525903 0.0000422709 -0.0000752264 -0.0003866074 0.0001637995 0.0001102647 -0.0000070979 -0.0000189861 -0.0000599204 0.0000203630 0.0000031722 0.0008203839 -0.0000619007 -0.0000350908 -0.0003011633 0.0005152171 -0.0000768523 -0.0002244139 0.0001313671 -0.0000298269 0.0001193738 0.0000561864 -0.0000339875 -0.0020100122 0.0004062920 0.0004721099 0.0007058670 0.0008861871 -0.0004535858 -0.0001499280 -0.0001759925 -0.0000978506 -0.0000453941 -0.0000775507 -0.0000075080 0.0000402092 0.0000915560 -0.0000108400 0.0000220929 0.0000679568 -0.0000126064 0.0005056947 0.0003072318 0.0005551895 0.0000865575 -0.0001113075 0.0002164156 -0.0000082737 -0.0000043761 -0.0000002298 0.0000019979 -0.0000104410 0.0000136294 -0.0002305593 -0.0001529181 -0.0003481396 0.0001373432 0.0002065082 -0.0000012808 -0.0000364150 -0.0033835470 0.0050278585 0.0081780093 0.0189321298 -0.0121721606 -0.0013247157 -0.0008814614 -0.0050176083 -0.0171615953 -0.0042846251 0.0071186603 0.0008928917 -0.0009663100 0.0060360728 0.0146802227 -0.0018852994 -0.0044268478 -0.0131765578 -0.0008252554 -0.0092676012 -0.0148440804 0.0137328501 -0.0098712231 0.0089339567 -0.0667357805 0.0221306335 0.2205409586 -0.0034296037 -0.0228476955 0.0532063955 0.0093451371 -0.0084167292 -0.0149201331 0.0258187521 -0.0187327335 -0.0588831029 -0.0558130423 0.0266840630 -0.0138267148 0.0197707680 -0.0336880969 -0.0058042448 -0.0085954165 0.0069674722 0.0389886006 0.0262928373 0.0318037887 0.0206123872 0.0412508327 -0.0214772009 0.1308030815 0.0626178902 0.1269986104 0.0205854306 -0.0122487824 0.0260065031 0.0521718215 0.0299210040 -0.0090703384 0.0007953998 -0.0001220324 0.0051103862 -0.0056261703 -0.0039493816 0.0020182075 -0.0047782357 0.0038738964 -0.0149665034 0.0058232191 -0.0037928225 -0.0016375415 0.0041561008 0.0055763615 -0.0019739823 -0.0009049401 0.0002517621 0.0007015719 -0.0010385226 0.0002366727 0.0009002974 -0.0005393512 0.0003527415 0.0001909395 0.0001754133 -0.0004804864 -0.0002406566 0.0003278764 0.0009565098 0.0001715956 0.0006896562 -0.0027343105 -0.0015763798 0.0005105765 0.0046803629 0.0043221696 -0.0007052324 -0.0000952163 0.0004811522 0.0003366318 -0.0023236640 -0.0012412768 0.0001603191 0.0000222895 -0.0003154563 -0.0010013907 0.0002976059 0.0003268447 -0.0004309302 -0.0003414086 0.0023927472 0.0003242701 -0.0009568499 -0.0002245167 -0.0000524136 -0.0000161385 0.0000296786 0.0003196984 -0.0001670432 -0.0001870101 -0.0000047235 -0.0002666024 -0.0002327247 -0.0000473831 0.0003686306 0.0001170950 -0.0001802620 0.0002321071 0.0000907444 0.0005498351 -0.0003272904 0.0000221090 0.0008038866 -0.0008548739 0.0015349630 -0.0024064732 0.0019205288 0.0010025716 -0.0000914507 0.0019433701 0.0003922556 0.0007383646 0.0004712302 -0.0002436723 0.0018519003 0.0003638878 -0.0007998569 -0.0010752830 0.0089794077 0.0210229786 -0.0552796764 -0.0414953052 -0.0214024080 0.0010213891 0.0009688864 0.0008672288 -0.0021529675 0.0002255971 0.0008626035 -0.0009992471 -0.0004726177 0.0000768798 0.0011637275 -0.0004812056 -0.0006542846 -0.0035646091 0.0048302089 -0.0011476290 -0.0001123134 -0.0010980075 0.0015331228 -0.0005246002 -0.0002630713 -0.0002187270 0.0020412587 -0.0005714162 -0.0012852448 -0.0011771874 0.0005619255 0.0009638685 0.0082967346 -0.0140750258 0.0154581248 0.0044415610 -0.0162865143 0.0028392793 0.0192711592 -0.0181075274 -0.0072782313 0.0072931413 0.0025979434 -0.0125357867 -0.0031969206 0.0105995459 0.0020254229 -0.0094264283 0.0024521531 0.0011768500 0.0020073030 0.0027438818 0.0022095488 -0.0013168346 0.0013080626 0.0025594293 0.0024048294 0.0029085601 0.0018684079 0.0035863494 -0.0036298275 -0.0029714773 -0.0006252804 0.0033585536 0.0017686451 0.0032414064 -0.0017146544 -0.0032778849 -0.0776551999 0.0477360033 -0.0098967471 -0.0158791020 0.0055229621 0.0040534459 0.0276347330 0.0037102769 0.0179382239 0.0082907463 -0.0064103519 -0.0042650542 0.0147925590 -0.0225102904 -0.0186947590 -0.0217337024 0.0101493494 0.0042677764 0.0854213412 0.0058059971 0.0440880603 0.0602170769 -0.0194996069 -0.0002542785 -0.0006593146 0.0004472265 0.0001104338 0.0928081780 -0.0282122471 0.0104238508 0.0695647541 -0.0769729649 -0.0562289060 -0.0163659010 -0.0088320259 -0.0045509301 0.0220694739 0.0075830148 -0.0111542879 0.0107836649 0.0056629110 0.0025244160 0.0092220977 0.0113704221 0.0236810171 -0.0149501737 -0.0069130391 -0.0059604248 0.0487055904 0.0228877510 -0.0237559445 0.0589995428 0.0363674503 0.0359482684 -0.0010270038 -0.0005822294 -0.0005462347 0.0601347327 0.0328100432 0.0148789349 0.0287853703 0.0273411028 0.0576300775 -0.0018619924 0.0023739522 0.0030266201 -0.0023412774 -0.0007317803 -0.0020147513 -0.0002943712 -0.0018127319 -0.0028751510 -0.0035436164 -0.0000492173 0.0019288151 0.0015891604 0.0512194404 -0.0204408380 -0.0521247095 0.0739849192 -0.0201722391 -0.0108038835 -0.0218018962 0.0104673301 -0.0027821602 -0.0030949885 0.0014166180 -0.3315303158 0.0043467565 0.0506014559 0.0462020999 -0.0974466553 0.0296853668 0.0443498589 -0.0288259407 0.0057716650 -0.0134140862 -0.0166760378 0.0070847815 0.4380236369 -0.0873139660 -0.0931709436 -0.0387669956 -0.0527662964 0.0374407614 -0.0635717985 -0.1082797116 -0.0106105566 -0.0187641136 -0.0623628419 0.0280344221 0.0296030673 0.0454748222 0.0103457966 -0.0015075638 0.0226699884 -0.0183506177 0.2878881355 0.1803541581 0.3608288134 0.0157176791 -0.0172177155 0.0273081213 0.0005117948 0.0246533118 -0.0210473745 0.0026226613 0.0013946364 0.0030379553 -0.2472161251 -0.0759529373 -0.3099392116 0.0567185434 0.1114190504 -0.0011559180 -0.0003896243 -0.0000477132 -0.0001580750 -0.0011730496 -0.0013343397 0.0008810370 -0.0011160149 -0.0016885419 0.0008220669 -0.0006227811 -0.0001408024 -0.0001485773 0.0009974397 0.0000947449 -0.0010172401 -0.0053954799 -0.0016442484 0.0027314134 -0.0011552912 0.0022901121 0.0004485081 -0.0026134463 -0.0022508878 0.0029298367 0.0004767868 -0.0011308279 0.0003199250 -0.0013637025 -0.0022947284 0.0013061069 0.0027573842 -0.0026107497 0.0006358086 0.0006438763 -0.0018103756 0.0010852839 0.0020828668 0.0023526708 -0.0014290556 -0.0029498592 0.0042738884 -0.0079983964 -0.0023958290 -0.0028058075 -0.0006547377 -0.0036158337 -0.0052956313 0.0001121003 -0.0011614308 -0.0004910866 -0.0009686654 0.0116290618 0.0001838743 0.0155891118 0.0000883587 -0.0002980822 0.0034845366 -0.0026833380 -0.0023223509 -0.0006003756 0.0093088193 0.0046619846 -0.0057124950 -0.0144046307 -0.0078673650 0.0090949954 -0.0030862184 -0.0011461769 0.0018870326 0.0850185537 -0.0277637176 -0.0650697011 0.0424993106 0.0495253304 -0.0054131045 -0.0158334253 0.0007573035 0.0092579875 -0.0137896535 -0.0039793835 0.0060995052 -0.0033198566 0.0064171881 0.0047626222 0.0080396770 -0.0019952103 -0.0058107620 0.0056283743 0.0085677891 0.0010378284 0.0071615439 -0.0327808327 -0.0159916158 -0.0061249358 0.0468571919 0.0198403885 -0.0338205771 0.0153486965 0.0280595643 0.0025782483 -0.0413773333 -0.0277283613 0.0330035363 0.0116056248 -0.0145168614 -0.0475179679 -0.0032038981 -0.0032078815 -0.1162059005 0.0372687945 0.1697940133 0.0097844999 -0.0128075405 -0.0008863162 0.0016099905 -0.0017009398 -0.0012346589 -0.0023393662 -0.0015694221 -0.0005946227 -0.0017057166 0.0049857816 -0.0008373285 0.0010659316 0.0004612564 -0.0010249504 -0.0026620869 -0.0029327583 -0.0002251504 -0.0244602675 0.0118206229 0.0157016915 0.0060714850 0.0458988752 0.0211758944 0.0266359867 -0.0155523539 -0.0117616047 -0.0011011954 -0.0014383769 0.0057626331 0.0068959389 0.0006214370 0.0000671558 0.0089493709 0.0132304006 0.0016900515 -0.0058008858 0.0294522277 -0.0064878595 0.0022302416 0.0016596221 0.0020545904 0.2183508516 0.1872232190 0.0628374780 -0.0495555134 0.1002655174 0.0794316346 -0.1265755308 -0.1047613212 -0.0239954149 0.0102495161 0.0051353636 0.0028009941 0.0156600402 -0.0146739383 0.0032741953 0.0076804238 0.0077422434 -0.0148702868 0.0064367283 -0.0003786769 -0.0029174952 0.1294336101 -0.0637206312 -0.0973143438 -0.0645148964 0.0524531001 0.0637682901 -0.0519968732 0.0427175825 -0.0526802583 -0.0151731906 0.0573489622 0.0015924531 -0.0666778914 0.0552499719 0.0146567619 -0.0300818200 -0.0127507826 0.0606293358 0.0192644157 -0.0128183057 0.0329124623 -0.0198981221 -0.0402634378 0.0337807380 0.0031089014 -0.0036768187 -0.0042669606 -0.0075017927 0.0234978358 0.0260933275 0.0007518179 -0.0042491015 -0.0057577028 0.1992265518 -0.1429632041 -0.1124246294 -0.0340236051 0.2096329651 0.1112020528 0.1788456335 -0.0552843388 -0.1663594801 -0.0022713803 0.0006679488 -0.0006532790 0.0007912305 0.0000090945 0.0006026432 -0.0002810909 0.0008083192 0.0011170316 0.0001309427 -0.0006115134 -0.0007212612 0.0010350248 -0.0006247868 -0.0006341618 -0.0010583960 0.0008854421 0.0000459690 0.0051564073 0.0006982445 0.0012563949 -0.0003770426 0.0037656316 -0.0002524570 -0.0003388226 -0.0008033741 -0.0011503017 0.0018312988 -0.0025308328 0.0013976621 0.0017845723 -0.0040940319 -0.0007504929 0.0014034658 0.0007914638 0.0013321677 -0.0026518830 -0.0011210239 -0.0007317656 -0.0004811531 -0.0011032982 -0.0026938006 0.0003685818 0.0001173486 -0.0006940935 0.0011000856 0.0007916779 0.0012221850 0.0120544735 0.0056031560 -0.0009180470 0.0005182097 -0.0056572605 0.0024041120 -0.0004937723 -0.0008679019 -0.0007241549 -0.0118341200 -0.0075232851 0.0029357821 -0.0052454424 -0.0040994027 -0.0075997224 -0.0003033576 0.0006310763 0.0005038131 0.0003418776 0.0000775948 0.0004278465 -0.0000341785 0.0014604441 0.0018367688 0.0005642517 -0.0000488961 -0.0005521647 -0.0004405151 0.0043088914 -0.0016630615 -0.0036035578 0.0050518967 -0.0014005636 -0.0000692825 -0.0020403720 0.0008035014 0.0000630284 0.0000001752 -0.0000306854 -0.0206515261 -0.0004284938 0.0034829209 0.0021135826 -0.0040202586 0.0011992505 0.0023360317 -0.0019928401 0.0005143988 -0.0010195343 -0.0011275452 0.0005166168 0.0232796046 -0.0049231698 -0.0041709081 0.0006446693 0.0012823033 0.0000294649 0.0066233849 0.0078336178 0.0041462124 0.0013828752 0.0049477120 -0.0024818052 -0.0013380885 -0.0029559701 0.0003119246 -0.0004247875 -0.0026038581 0.0011515391 -0.0206441573 -0.0123079400 -0.0243508062 -0.0044413438 0.0090630566 -0.0126914861 -0.0010588997 -0.0024769996 0.0005066603 -0.0000644499 -0.0000197330 -0.0001550970 0.0185388595 0.0055105529 0.0237867131 -0.0018082230 -0.0029874809 0.0001704703 -0.0504180690 -0.0635093921 -0.0241513720 -0.2963917747 -0.2094722689 0.0959844670 -0.1117997708 -0.1975451825 0.1102145856 -0.2066193136 -0.0440894148 0.0284079175 -0.0668093096 -0.0646143759 -0.0330342700 -0.0933683006 0.2700328017 0.1172292685 -0.1224513941 0.1734183198 0.2146045707 0.2246748428 -0.0487695708 -0.1037174582 -0.0005981015 0.0004523959 0.0000259587 0.0035488141 0.0021649777 -0.0007763269 -0.0020038851 0.0023141042 -0.0007203117 -0.0010431836 0.0012270830 -0.0006334673 -0.0018769406 -0.0020775357 0.0009852025 0.0006065085 -0.0010477291 0.0017173859 0.0008369193 0.0014839893 -0.0003832622 0.0007311271 0.0017168970 -0.0003855608 -0.0000978191 -0.0007315228 0.0005374367 0.0011538726 0.0018022807 -0.0004741467 -0.0012137843 0.0005831461 -0.0012637056 0.0005844794 0.0000263602 -0.0006863293 0.0039830157 0.0019952927 -0.0019645556 -0.0070402053 -0.0034430632 0.0044390647 -0.0014863643 -0.0008879931 0.0001223181 0.0378375688 -0.0205956605 -0.0349359701 0.0384566987 0.0390759856 -0.0086043673 -0.0106961729 -0.0025301227 0.0052603307 -0.0057179826 0.0019025189 0.0023356971 -0.0054477240 0.0031273517 0.0049596108 0.0037858298 -0.0025082755 -0.0026831003 -0.0013058636 0.0086697850 0.0041176217 0.0143052705 -0.0169312520 -0.0159492410 -0.0096099016 0.0609983934 0.0243581783 -0.0006157213 -0.0006927244 -0.0010850254 -0.0011217608 -0.0517992797 -0.0215977260 0.0100097042 0.0017065527 -0.0035049395 -0.0196215283 0.0121815941 -0.0058285239 0.0282880018 -0.0369175715 0.1357115303 0.0084718441 -0.0134204845 -0.0002736313 -0.0004773580 -0.0023857596 -0.0004286620 0.0022631854 -0.0026990054 -0.0039150585 -0.0008625470 0.0025078246 0.0003535010 0.0014793653 0.0021153485 -0.0010999090 -0.0034166209 0.0008482312 0.0010887941 -0.0142201655 0.0084749189 0.0253406894 0.0010516487 0.0175484317 0.0067739938 0.0032797043 0.0017642600 0.0002519181 -0.0025173619 0.0116017347 0.0055803946 0.0111321388 0.0037032717 -0.0007863252 0.0038836849 0.0027775541 0.0012144862 -0.0048553435 0.0499925736 -0.0017264432 -0.0000053102 0.0004935402 0.0010885431 -0.3719896837 0.0283572417 0.1524187012 -0.0547545073 0.0613658788 0.0606976507 -0.0119714335 -0.0078255871 0.0013482102 0.0006369326 0.0033607577 0.0042579927 0.0003712697 -0.0016944217 -0.0016123650 0.0021191481 0.0029537974 -0.0135562848 0.0003077815 -0.0067940749 -0.0072273414 0.1067323185 -0.1169087317 -0.1242945895 -0.0359561296 0.0869850106 0.0726648688 -0.0002520272 -0.0103951869 0.0059807769 -0.0013284257 0.0051636405 -0.0043498254 -0.0042460515 -0.0001100453 -0.0029021322 -0.0070263194 0.0019094657 0.0463886037 0.0098444899 0.0007361876 0.0509715717 -0.0182463373 -0.0319332333 0.0225364978 0.0155814809 0.0136349507 0.0115646113 -0.0166271929 0.0228033513 0.0306234485 0.0135644275 0.0175643095 0.0075332142 0.1297788840 -0.0851354839 -0.0962183353 -0.0431432200 0.0927827953 0.0400086563 0.1348141624 -0.0263665438 -0.0939103705 0.0013012698 -0.0011966058 -0.0006514187 0.0004695494 -0.0000335474 0.0000908791 -0.0006320904 0.0001306472 0.0000206949 -0.0001868229 -0.0001612812 -0.0001707160 0.0002454752 0.0004473307 0.0004362019 0.0001980552 0.0001946840 0.0001756477 -0.0004666481 -0.0001823467 -0.0002453995 -0.0004759178 0.0014316180 -0.0009257880 0.0004855718 -0.0005432757 -0.0008145789 -0.0023256365 -0.0001638757 0.0001650475 -0.0025065355 0.0023426568 0.0021585764 0.0008609101 0.0005383798 -0.0001005635 -0.0011529743 0.0001538529 -0.0000759314 -0.0006015576 -0.0002273679 0.0003549180 0.0005030673 0.0001161662 -0.0007672393 0.0001640490 -0.0000824474 -0.0002786645 0.0006088205 -0.0007080964 0.0004768437 -0.0002931225 0.0028555681 0.0015619813 -0.0011043522 -0.0003874389 0.0002664481 0.0011656265 -0.0007095082 -0.0006102536 -0.0014662027 -0.0014147119 -0.0026123718 -0.0002097181 0.0007042622 0.0008657469 -0.0001893422 -0.0001935107 -0.0002752777 -0.0001024993 0.0005140066 0.0006294656 0.0010108917 0.0002957302 -0.0007538018 0.0006200739 -0.0032486886 0.0012009996 0.0036669269 -0.0035467426 0.0008601303 -0.0001163896 0.0013249294 -0.0005256239 -0.0001361012 -0.0000515411 0.0000454309 0.0145277260 0.0002631509 -0.0022063150 -0.0014333754 0.0025346463 -0.0006377337 -0.0013231927 0.0015328053 -0.0004830451 0.0004710092 0.0010989913 -0.0004442409 -0.0178998185 0.0039329356 0.0033137305 -0.0023198781 -0.0028024155 0.0011576053 -0.0011421853 -0.0023025450 0.0000960387 -0.0010577459 -0.0018891990 0.0001112903 0.0005564422 0.0010393335 -0.0000487269 -0.0001430987 0.0003478861 -0.0005020559 0.0045559240 0.0031654367 0.0053325700 0.0003076867 -0.0011802275 0.0015463446 0.0000948855 0.0005562993 -0.0003628547 0.0001841054 -0.0001169476 0.0003546447 -0.0028699716 -0.0006061366 -0.0037159960 0.0008678421 0.0015101963 0.0004095736 0.1112428452 -0.0019264598 -0.0544115885 -0.0916804236 0.0552111311 -0.0724597671 0.3020483709 0.3435630720 0.0728553805 0.0084738358 0.2472307555 0.1431616748 0.1143830057 -0.0340481821 -0.0441350715 0.2247821663 -0.1338934037 -0.1491529205 0.2873308615 -0.1960364150 -0.0750870237 0.2776321210 -0.0886492376 -0.0268640689 0.0221327257 -0.0078212105 -0.0009475876 -0.1873989967 -0.0640040265 0.0424751551 0.0637650400 -0.0792146627 0.0230908539 0.0451637325 -0.0461690442 0.0226156918 0.0728379411 0.0910648966 -0.0441332380 -0.0379266530 0.0676003316 -0.1118576243 -0.0417168581 -0.0581006755 0.0007886501 -0.0424948606 -0.0799458191 0.0149437537 -0.0052406394 0.0176540701 -0.0236552935 0.1080891371 -0.0281257765 0.1714746333 0.0311086843 -0.0153035599 0.0596807192 -0.0503746074 -0.0233606362 0.0147071966 0.0049099727 -0.0066911378 -0.0044451690 -0.0049089862 0.0024020631 0.0056887768 -0.0035818607 0.0048904114 0.0010570973 -0.0040189833 0.0020780486 0.0025966268 -0.0010697552 -0.0010315998 -0.0002957186 0.0007314664 0.0001444911 -0.0003194625 0.0004216130 0.0000395954 -0.0002675056 0.0003334419 -0.0001017158 -0.0003406802 -0.0004611665 0.0000111110 0.0004088345 -0.0001448748 -0.0004567051 -0.0001200389 -0.0008517066 0.0004588307 0.0007299629 0.0010506537 -0.0026452762 -0.0002387391 -0.0005567445 0.0001288645 -0.0005665642 -0.0000378817 0.0018713540 0.0010116075 -0.0005368747 -0.0004659872 0.0001837386 0.0012471412 0.0002074446 -0.0002079866 0.0038198925 -0.0017211934 -0.0013128769 -0.0001951145 0.0005255984 0.0001371421 0.0000005401 0.0000561541 0.0000215018 -0.0000096028 -0.0000039353 -0.0000061828 -0.0001359759 0.0001505826 0.0001705819 0.0001623326 -0.0002385354 -0.0001064637 -0.0000185397 0.0000379610 0.0000466992 0.0003641868 -0.0001990418 0.0000316371 -0.0003661709 0.0000179308 -0.0005493588 0.0009614326 -0.0008324338 -0.0006390036 -0.0001477970 -0.0004866984 -0.0003166895 -0.0006667873 -0.0002964300 0.0000710542 0.0006414745 0.0001303145 0.0000813424 -0.0027369614 -0.0033516098 -0.0020608130 0.0088897899 -0.0041118200 -0.0103837167 -0.0153622971 -0.0082540572 -0.0005456210 0.0026664009 -0.0028147637 -0.0027543413 0.0054482808 0.0042893156 0.0009220879 -0.0009606629 -0.0005561403 0.0012681069 -0.0028875802 0.0033783501 -0.0014087466 0.0011365901 0.0053211723 -0.0088554212 0.0000655018 0.0005447122 0.0003014676 -0.0046310589 0.0010450071 0.0027169577 0.0025132171 -0.0010811403 -0.0019173060 0.0153581366 -0.0105955458 0.0121692367 0.0053395743 -0.0166019450 -0.0002548110 0.0115061730 -0.0078309487 -0.0024297189 -0.0251992674 -0.0092705332 0.0378304425 0.0144303129 -0.0273832078 0.0297908947 0.0006549979 -0.0236229255 0.0158891910 -0.0026544031 -0.0026958253 -0.0022086665 0.0019847844 -0.0033087553 -0.0025896243 -0.0010798526 -0.0022630759 -0.0012421641 -0.0076813119 0.0058839346 0.0041818882 0.0011384581 -0.0075828680 -0.0042478556 -0.0066428690 0.0025244894 0.0066885025 -0.0324612895 0.0171326462 0.0034167508 -0.0087617645 0.0020906327 -0.0007614216 0.0101966206 0.0011980527 0.0058958062 0.0039641258 -0.0018232981 -0.0006991846 0.0022206282 -0.0077673864 -0.0078581133 -0.0071497057 0.0031835087 0.0000263344 0.0265825070 0.0025330770 0.0130692104 0.0232087469 -0.0094037708 -0.0006699885 -0.0014695326 0.0006045197 0.0002173738 0.0396017547 -0.0097197692 0.0057378911 0.0332613095 -0.0391247086 -0.0248783494 -0.0067960793 -0.0012275318 0.0047700237 0.0026205101 0.0025704975 0.0042740772 0.0007727741 -0.0011169996 -0.0054030724 -0.0031954347 -0.0007019872 0.0017617886 0.0019478098 0.0032861946 0.0066203035 -0.0166388351 -0.0101349188 0.0088466238 -0.0029087908 -0.0013604753 -0.0030726964 0.0012813935 0.0004268024 0.0006325969 -0.0004114036 -0.0013889286 0.0017253959 0.0119721491 0.0134347202 0.0204080964 -0.0002899482 0.0000377461 -0.0000156995 -0.0002201386 0.0000984061 0.0001077882 0.0003279521 -0.0002121526 -0.0005476870 -0.0015359997 0.0000081377 0.0007759891 -0.0282566796 0.0972214599 -0.0344107726 -0.1106884489 0.1010267255 -0.0231218925 0.0069477020 -0.0410767114 0.0152826293 0.0033844711 0.0044998974 -0.0025322653 -0.4146646185 -0.0089960917 0.0672489837 0.0513328645 -0.0878928713 0.0247673087 0.0429040800 -0.0431442615 0.0123403754 -0.0171147531 -0.0329396729 0.0137814140 0.4951620659 -0.1078394595 -0.0895132726 0.0731557082 0.0941654869 -0.0368672500 0.0719400690 0.1003855973 0.0310060139 0.0326984514 0.0750721285 -0.0200846807 -0.0196398274 -0.0396283465 0.0038426816 -0.0001440673 -0.0270211381 0.0193928870 -0.2331207063 -0.1485057637 -0.2781708513 -0.0410964134 0.0984769185 -0.1339712067 -0.0111987526 -0.0302412625 0.0098629806 -0.0045779775 0.0016056377 -0.0085231471 0.1947524254 0.0513273219 0.2486880750 -0.0281719383 -0.0468777911 -0.0070762163 0.0038011556 0.0026478246 0.0002024918 0.0123663113 0.0099112202 -0.0053914064 0.0101424365 0.0152092338 -0.0036556663 0.0097256716 0.0056975736 0.0008081671 0.0041082065 0.0025409185 0.0010010610 0.0100157906 -0.0136203228 -0.0094275404 0.0117136249 -0.0118626002 -0.0093983302 -0.0045310130 0.0010037550 0.0040031427 -0.0196342501 0.0089508647 -0.0003010619 0.2669323367 -0.0016557974 -0.0280236643 -0.0348631825 0.0226793980 -0.0046592500 -0.0547788444 0.0096746425 0.0035143662 -0.0492033809 -0.0569320928 0.0270901949 -0.0272364038 0.0497997370 -0.0729929934 -0.0342688850 -0.0275399065 -0.0346038995 -0.0255958506 -0.0340561176 -0.0047853443 -0.0118491854 0.0018087636 -0.0162003028 0.1827009065 0.0441548628 0.2097605968 0.0331870420 -0.0164045441 0.0410313940 0.0425870728 0.0233108473 -0.0071656894 -0.0250797207 -0.0264852390 0.0568461226 0.0520766809 0.0299704499 -0.0442160511 -0.0110322856 0.0205254395 -0.0641567484 -0.0002833366 -0.0003685863 0.0025289301 0.0000771490 -0.0024897879 0.0008811308 0.0004440211 -0.0008140998 -0.0007508819 0.0017049906 0.0004879275 -0.0011396001 -0.0003770184 -0.0005822866 -0.0001390464 0.0001366692 0.0005570770 0.0000474798 -0.0010350647 -0.0003864961 0.0004636796 0.0025457654 0.0061825611 0.0018276371 -0.0002253677 -0.0078718966 -0.0032888139 0.0034585044 -0.0008872502 -0.0018393554 -0.0009488380 -0.0035432268 -0.0003696045 -0.0010111566 0.0004527635 0.0008965297 0.0007328906 0.0002481637 -0.0002909473 0.0020691991 -0.0002974156 -0.0056905877 0.0003867656 0.0000166097 -0.0001930968 -0.0004522584 -0.0002935959 0.0001324143 -0.0002140656 -0.0003014884 0.0000228428 0.0004418950 0.0008742220 -0.0001585580 0.0003603952 -0.0004751891 -0.0001963619 0.0000515552 0.0001855505 -0.0000552321 -0.0047521184 0.0025184786 0.0024963605 0.0002970839 0.0003456980 0.0011732370 0.0015224843 -0.0013146689 -0.0011548354 0.0001467218 -0.0015389073 0.0002045506 -0.0000740819 -0.0001010572 0.0000401080 -0.0053206989 -0.0031856735 -0.0011156896 0.0186120346 -0.0079648902 0.0120605875 0.0139492289 0.0066516810 -0.0008234633 0.0035535889 0.0134869915 0.0072847247 -0.0111567515 0.0021091846 0.0056668910 -0.0077269655 -0.0042330098 -0.0005713510 0.0083069460 -0.0078428693 -0.0082953013 -0.0536040512 0.0687222392 -0.0208206659 -0.0066274954 -0.0271148726 0.0629119400 -0.0020505731 0.0451475961 0.0450436026 0.0127538495 -0.0061675741 -0.0096244891 -0.0060440456 0.0053450210 0.0060493217 0.1918573107 -0.2091691884 0.2265451252 0.0812260190 -0.2877494373 0.0451289423 0.2710569157 -0.2002121398 -0.0614174473 0.0902896893 0.0144914674 -0.2649088052 -0.0727358146 0.0979591322 -0.2246086475 0.0368186851 0.1939268108 -0.1381727381 -0.0706290470 -0.0848017922 -0.1822943100 0.0911693475 -0.1242352011 -0.1610127747 -0.0160348574 -0.2040779825 -0.0740622655 0.0188689684 -0.0145167334 -0.0120548798 -0.0034490734 0.0169699984 0.0099821366 0.0168157626 -0.0079618593 -0.0158692879 0.0232729718 -0.0138879185 -0.0000474607 0.0051747326 -0.0018984802 0.0007046522 -0.0079684214 0.0000443419 -0.0040465598 -0.0007793320 0.0026256169 0.0023785746 -0.0006626667 0.0046717793 0.0055471505 0.0051378934 -0.0038259564 -0.0021728843 -0.0156263518 0.0037614797 -0.0148996330 -0.0120420321 -0.0017188398 -0.0007628930 0.0004131342 -0.0005928167 0.0005970006 -0.0396534344 0.0072335832 -0.0100782057 -0.0314204779 0.0322222569 0.0202272421 -0.0010739197 -0.0002034663 0.0033902407 -0.0014822478 0.0006378271 0.0042532641 -0.0003961322 -0.0011254830 -0.0042487215 -0.0028545432 -0.0020644814 -0.0031053776 0.0041778529 0.0030425586 0.0051743935 -0.0234788495 -0.0004252615 0.0060184815 -0.0063099512 -0.0038342038 -0.0017531111 -0.0001058625 -0.0003879853 -0.0001463518 -0.0123574184 -0.0074575747 -0.0009725373 -0.0051048852 -0.0015823721 -0.0075344264 0.0005782046 -0.0006261556 -0.0008456697 0.0000631649 0.0001261620 -0.0000405644 0.0001434713 0.0008259065 0.0012190673 0.0003543087 -0.0001056324 -0.0005163985 0.0228608068 -0.0081754087 -0.0007984400 0.0705972525 0.0018758746 -0.0126637268 -0.0182395530 0.0033527669 0.0018499257 0.0042123943 -0.0086913558 0.0027049304 0.0590928035 -0.0023997236 -0.0082430395 -0.0164403870 0.0294014796 -0.0083355769 -0.0014664394 0.0013068780 0.0005747137 -0.0039305561 0.0198116597 -0.0064235982 -0.0677847453 0.0095875596 0.0105694263 -0.0927995666 -0.1054470371 0.0524526527 0.0436756743 0.0182851200 0.0541302196 0.0143754692 0.0170850997 0.0075895224 0.0008346411 -0.0036751593 0.0037605113 -0.0063759170 -0.0202904813 0.0050263806 -0.0575595304 -0.0322638303 -0.0695623712 -0.0407920910 0.0899900270 -0.1304236470 -0.0113333673 -0.0080549737 -0.0109519090 0.0023732081 0.0061004212 -0.0013651294 0.0497161815 0.0165950387 0.0617455912 -0.0087651467 -0.0151583297 -0.0008446743 0.0000735387 -0.0030358472 -0.0019577165 -0.0213967547 -0.0091899001 0.0039207448 -0.0023117189 -0.0083915569 0.0058391812 -0.0134437537 0.0020063804 0.0047407384 0.0026033929 -0.0053477875 -0.0049276226 -0.0045994613 0.0144711610 0.0074278254 -0.0041181495 0.0166354852 0.0169843622 -0.0085302209 -0.0107788515 0.0053359134 -0.0126801405 0.0005287817 0.0019102794 0.2058351177 0.0013924587 -0.0230091025 -0.0255207749 0.0200742107 -0.0046068490 -0.0430555821 0.0108619376 0.0014920832 -0.0363529858 -0.0458977807 0.0202954591 -0.0184184517 0.0375913794 -0.0547809320 -0.0284213792 -0.0177352529 -0.0321934100 -0.0203830335 -0.0230359588 -0.0067591576 -0.0107289050 -0.0020931615 -0.0110851160 0.1547165209 0.0408405711 0.1692957109 0.0231719769 -0.0113220690 0.0324844118 0.0317753286 0.0180307278 -0.0044748984 0.0062616110 0.0021335817 -0.0020031209 -0.0123676038 -0.0067256751 0.0078890423 -0.0045322642 0.0010151214 -0.0055935699 0.0462578537 -0.0500198322 -0.0556794253 0.0661096096 0.0630051424 -0.0162584727 -0.0188971247 -0.0083002256 0.0081480952 -0.0196047933 0.0182375070 0.0208264195 -0.0033724885 0.0040735662 0.0042701729 0.0048241063 -0.0123339169 -0.0072404479 -0.0017798727 0.0267675559 0.0116797892 0.0252883749 -0.0190074709 -0.0262942181 -0.0086085132 0.0873412348 0.0325609832 0.0394283394 -0.0273652107 -0.0334739038 -0.0026901123 -0.0958569680 -0.0384907502 -0.0039122282 -0.0127948422 -0.0024420478 -0.0018361536 0.0016732402 0.0010234801 0.0248834393 -0.0184281556 -0.0203053896 0.0014921860 -0.0010086861 -0.0000344344 0.0000861929 -0.0010312161 -0.0001128312 0.0004840951 -0.0002435715 -0.0003574027 -0.0009480031 0.0030357067 0.0007677587 -0.0006736564 -0.0004808301 0.0002571606 -0.0004255336 0.0000594700 0.0002031314 -0.0050589713 0.0034017107 0.0034438851 -0.0003351263 0.0030299362 0.0020056023 0.0097292302 -0.0075300519 -0.0054194612 -0.0003811989 0.0024457636 0.0003309814 0.0044521336 0.0015976472 -0.0017432323 0.0061587977 -0.0006939875 0.0007185262 -0.0058151332 0.1096221605 0.0084873088 0.0130531639 0.0077261783 0.0036889025 0.0063177831 -0.0120471465 -0.0086158761 0.0016570777 -0.0044233887 -0.0041433587 0.0048557680 0.0040142089 0.0005847721 -0.0010894595 0.0064478926 0.0111834886 0.0032106770 -0.0046456893 -0.0017411432 0.0035869729 0.0136377451 -0.0361939292 -0.0016111518 -0.0910130485 -0.0947731649 -0.0083984075 0.0067141156 0.0081466378 0.0037626553 -0.0046304965 -0.0042134821 -0.0100490985 0.0025002598 -0.0084911649 -0.0080743165 0.0127633311 0.0098443038 -0.0044233816 0.0102547438 0.0055983615 -0.0342467948 -0.0009785032 0.1237937966 0.0352545432 -0.0320020292 0.1374764751 -0.0404743302 -0.1039695245 0.0772215575 0.1609838460 0.2031264011 0.4016147710 -0.1978963539 0.2642913733 0.3633578946 0.0613255070 0.4398321335 0.1662844808 -0.0099656922 0.0052509742 0.0045646518 -0.0002035605 -0.0194303767 -0.0118599457 -0.0079041951 0.0033046739 0.0068978630 0.0140162768 -0.0074872715 -0.0008403189 0.0028405389 -0.0004542927 -0.0010155636 -0.0027882109 -0.0016963785 -0.0030665206 -0.0021691874 0.0004618796 0.0001321161 -0.0015299955 0.0039394712 0.0035603117 0.0035479158 -0.0010567946 0.0004661501 -0.0228443419 -0.0064592506 -0.0036044174 -0.0078567185 0.0028580067 -0.0007946991 0.0013292269 -0.0002562413 -0.0005367352 -0.0107782921 0.0040823413 0.0010227913 -0.0145255982 0.0175387910 0.0117495086 -0.0012617371 0.0000620363 0.0023828382 -0.0033825949 -0.0007712374 0.0031807193 0.0004609798 -0.0014565766 -0.0059652597 -0.0010406168 -0.0015811510 -0.0041880264 0.0047482764 0.0032996387 0.0056277353 -0.0026038916 0.0003514163 0.0029171387 -0.0017837340 0.0025152640 0.0070046881 0.0009835979 0.0001758972 0.0002342311 -0.0277070665 -0.0132322642 0.0015868574 -0.0175461025 -0.0117473060 -0.0248958518 -0.0001448162 0.0005168240 0.0008026274 -0.0003342122 -0.0002681591 -0.0004508974 0.0003193379 0.0004265797 0.0002611401 -0.0008741982 -0.0000845400 0.0004632937 0.0164986424 -0.0081537315 0.0002378817 0.0524944826 -0.0008553216 -0.0084982347 -0.0138180383 0.0035105026 0.0010240786 0.0028938411 -0.0063587674 0.0020159607 0.0513850771 -0.0013584963 -0.0075535589 -0.0104901867 0.0182967145 -0.0052208957 -0.0011996100 0.0015955025 0.0002118227 -0.0019453156 0.0153976925 -0.0051841286 -0.0573962461 0.0084669496 0.0085750937 -0.0695430985 -0.0799180854 0.0395791655 0.0333085636 0.0085146450 0.0456143346 0.0103392197 0.0082113624 0.0092950784 0.0014318970 0.0000656816 0.0017694137 -0.0052006851 -0.0161621111 0.0037944857 -0.0325901876 -0.0162525169 -0.0401290112 -0.0321643361 0.0706628645 -0.1026689016 -0.0096123361 -0.0050366127 -0.0106569449 0.0029614808 0.0060657931 -0.0003471060 0.0302547725 0.0103184100 0.0355537885 -0.0067703789 -0.0128248028 0.0001112754 -0.0030381145 0.0031182712 0.0032273418 0.0197368004 0.0077387336 -0.0016457216 -0.0072443775 -0.0035697848 -0.0080609546 0.0136943867 -0.0068303662 -0.0073893563 -0.0019467318 0.0050074943 0.0026901653 -0.0074597910 -0.0071471778 0.0012682181 -0.0034403205 -0.0026194833 -0.0073140201 -0.0199062031 0.0074451755 0.0043349635 -0.0029108906 0.0050053316 -0.0022954354 0.0246968443 -0.0049486840 -0.0017484849 -0.0034514056 -0.0020473956 0.0012851862 -0.0053453849 -0.0033023158 0.0020179446 -0.0032824777 -0.0032033324 0.0017613799 -0.0004644013 0.0021315230 -0.0016070680 -0.0003444033 -0.0039683067 0.0023654835 -0.0000654746 -0.0029877750 0.0025946040 0.0021993274 0.0046593124 -0.0016693856 -0.0025523578 -0.0039198611 0.0006481529 0.0016667518 -0.0011035236 0.0007238028 0.0037856154 0.0023579095 0.0002208760 -0.0075654508 -0.0056101850 0.0087713128 0.0122098441 0.0069518969 -0.0085921668 0.0017385851 0.0075915881 -0.0092436142 -0.1430637112 0.1689342767 0.1950091496 -0.2340900178 -0.2199779122 0.0584013361 0.0666404900 0.0316295801 -0.0278994378 0.0654272791 -0.0708302793 -0.0731600035 0.0111990345 -0.0128978615 -0.0147211156 -0.0151972859 0.0446771127 0.0251084475 0.0089482010 -0.0960667570 -0.0435432858 -0.0924983375 0.0596701836 0.0919363022 0.0328773322 -0.3119102849 -0.1100052756 -0.1565022915 0.1061940958 0.1298845806 0.0125341707 0.3657639253 0.1453254005 0.0157562156 0.0486017366 0.0075318662 0.0018046743 -0.0057898499 -0.0007933681 -0.0936107172 0.0647288336 0.0861436249 -0.0057280955 -0.0006261030 -0.0007095319 0.0003892082 0.0048290242 0.0002893466 -0.0001616860 0.0011113260 0.0007524081 0.0041507940 -0.0148225459 -0.0033541750 0.0015449703 0.0048559571 0.0003896558 0.0009678913 0.0001665930 -0.0004279032 0.0314264917 -0.0194008011 -0.0188379269 0.0024680064 -0.0138465419 -0.0086008469 -0.0530174668 0.0410843933 0.0259029829 0.0009626990 -0.0004368038 -0.0001883738 -0.0143254282 -0.0039891897 0.0064491475 -0.0136230477 0.0056783740 -0.0042183205 0.0096872347 -0.3683141967 0.0076913049 -0.0021344172 -0.0030782861 -0.0041402557 -0.0068754680 0.0141272854 0.0107317259 -0.0072659351 0.0030177629 0.0054171645 -0.0077081564 -0.0053542285 -0.0006963745 0.0011812991 0.0063685675 0.0007695051 0.0067251877 -0.0085376461 0.0028709770 -0.0038502934 -0.0168708261 0.0332511911 -0.0007289748 -0.0466896114 -0.0470233247 0.0122057529 -0.0076245245 -0.0109470507 -0.0055733199 0.0064078412 0.0070819009 -0.0243919857 0.0174981541 -0.0203993734 -0.0104909145 0.0368799518 -0.0057988125 -0.0279388260 0.0117517333 0.0004722472 0.0548081663 0.0118611928 -0.1279933495 -0.0425313124 0.0553831723 -0.1368474640 0.0340247933 0.1059342977 -0.0824767845 0.0869646617 0.1066824204 0.2018304772 -0.1036253172 0.1406350631 0.1849099994 0.0325016083 0.2234202516 0.0859861577 0.0199234573 -0.0124536384 -0.0098459043 -0.0058076597 0.0111834587 0.0051673859 0.0180649117 -0.0005542734 -0.0153647081 0.0054791219 -0.0004881392 0.0041327306 0.0061433051 -0.0018718691 0.0018184207 -0.0038197320 0.0003451903 -0.0012724075 -0.0019904821 -0.0008679594 -0.0021814258 -0.0012345983 0.0004552410 0.0000640827 -0.0006161219 -0.0003050597 -0.0009585052 -0.0070287947 0.0057175656 -0.0116840542 -0.0251422305 0.0217095277 0.0111411818 -0.0001675017 0.0001863595 0.0004193404 0.0016929170 0.0003438790 0.0012481364 0.0144108721 -0.0156552679 -0.0095961643 -0.0007533925 -0.0003867461 -0.0001201542 0.0020952182 0.0009493180 -0.0003367129 -0.0002900817 0.0006256685 0.0022542372 -0.0012237224 0.0000644295 0.0019690362 -0.0013407449 -0.0007429793 -0.0010943885 -0.0080344991 -0.0038932622 0.0013854785 -0.0030518181 -0.0039115562 -0.0081653881 -0.0000861185 0.0003566754 0.0009614763 0.0130081158 0.0059582806 -0.0010591300 0.0124490032 0.0107885867 0.0179697008 0.0001870171 -0.0006066925 -0.0006351886 0.0008848845 0.0000998716 0.0004693229 0.0000528434 -0.0009313136 -0.0007289724 0.0001504799 0.0001882149 -0.0002564045 0.0026893333 0.0039925214 -0.0019839667 0.0046898711 0.0051195079 -0.0028796317 -0.0021394337 -0.0013966328 0.0009224479 0.0010128817 -0.0014803935 0.0003832145 -0.0107454057 -0.0006580811 0.0020613940 -0.0020740352 0.0041922431 -0.0012159875 0.0007813663 -0.0020363304 0.0008872004 -0.0011046945 0.0012671092 -0.0002996018 0.0143840150 -0.0042077901 -0.0028998532 -0.0079105322 -0.0083840792 0.0045518537 0.0001750068 0.0033434047 -0.0022619507 0.0007109024 0.0031017290 -0.0018012264 -0.0004109246 -0.0014798231 0.0005870836 0.0003882603 0.0000524616 0.0005768564 -0.0058749086 -0.0044260300 -0.0069018155 0.0002071469 0.0004370114 0.0001442800 0.0001719132 -0.0009654837 0.0011418788 -0.0006221183 -0.0005738033 -0.0005194347 0.0051759414 0.0010844031 0.0070668211 0.0005284837 0.0017076227 -0.0005872991 0.0043459127 -0.0012950695 -0.0042905906 -0.0243093959 -0.0150343764 0.0070825524 0.0039953466 -0.0044104219 0.0133759398 -0.0228355090 0.0039261422 0.0052120170 0.0057324711 -0.0050008202 -0.0047127860 -0.0078663491 0.0004761224 0.0071171868 -0.0020518852 0.0083958214 0.0042065857 0.0202989635 -0.0166695478 0.0046903064 0.0125525161 0.0064762267 -0.0035697945 -0.2372228884 -0.0027402616 0.0289050505 0.0271947696 -0.0247109909 0.0057706659 0.0506705393 -0.0149122032 -0.0010809038 0.0380655672 0.0557112305 -0.0226415116 0.0167084607 -0.0418181985 0.0593292012 0.0347508384 0.0154284003 0.0433544863 0.0241759051 0.0222483269 0.0118227345 0.0141666710 0.0069988804 0.0106379550 -0.1910757991 -0.0543924821 -0.2001601108 -0.0226269682 0.0111500487 -0.0374899056 -0.0350956627 -0.0207201655 0.0029928104 -0.0401744500 -0.0324959507 0.0645022133 0.0843928171 0.0467380598 -0.0661174659 -0.0026514941 0.0141326081 -0.0518505551 0.0346590876 -0.0523868037 -0.0535110335 0.0633482156 0.0522819233 -0.0163379966 -0.0184618046 -0.0139290721 0.0057259454 -0.0177332069 0.0273866351 0.0229622669 -0.0024503127 0.0051022042 0.0044002039 0.0043022799 -0.0147973925 -0.0081633783 -0.0065224285 0.0303135353 0.0160245401 0.0351815346 0.0019950250 -0.0239160727 -0.0099946603 0.0703866663 0.0189322834 0.0613731188 -0.0400230232 -0.0484099059 -0.0079119253 -0.1301516491 -0.0485481629 -0.0094556531 -0.0183053663 -0.0001549663 0.0052226574 0.0029878941 -0.0018954941 0.0427039469 -0.0229642434 -0.0504203831 0.0030216228 0.0023925266 -0.0001569900 0.0000700142 -0.0015659091 -0.0002163505 -0.0013732272 -0.0001209072 0.0004817965 -0.0009029267 0.0050890312 0.0011150727 -0.0008092203 -0.0020623140 0.0000902005 -0.0001274283 -0.0005702989 -0.0000888077 -0.0174733246 0.0101433561 0.0090230132 -0.0013711722 0.0005876227 0.0017260950 0.0204374539 -0.0165807339 -0.0116462726 -0.0000792017 -0.0027180120 0.0000712549 0.0023888023 -0.0003078320 -0.0011064281 -0.0089085125 -0.0120276817 0.0004161892 0.0275633620 0.0994012943 -0.0149218959 -0.0175339280 -0.0120504302 -0.0104108306 0.0125134348 0.0112949037 0.0026056914 -0.0106795631 0.0003201158 0.0038306065 -0.0079217177 -0.0042836121 -0.0010755093 0.0067055856 0.0010928516 0.0036643978 -0.0458071195 0.0569642145 -0.0208362731 -0.0041862616 -0.0177158513 0.0409002304 -0.0029831746 -0.0553895137 -0.0594017670 0.0095870024 -0.0029905890 -0.0062261069 -0.0046773154 0.0035423897 0.0048099062 0.1746565932 -0.1865067569 0.1966115712 0.0678171856 -0.2556976306 0.0514371828 0.2414075616 -0.1621156983 -0.0423687434 0.0506287425 0.0027038499 -0.1828302394 -0.0461927233 0.0554449304 -0.1601852130 0.0346013178 0.1441269008 -0.1080205180 0.1066179929 0.1377491432 0.2597274855 -0.1273783027 0.1692061025 0.2385191443 0.0487963735 0.2793758183 0.1079573507 0.0170141296 -0.0126292254 -0.0096672382 -0.0056010778 0.0045256330 0.0016554598 0.0159747344 -0.0036924520 -0.0147994553 -0.0109879806 0.0003848741 -0.0030815527 -0.0065577227 0.0003587792 0.0006102657 -0.0004661582 0.0036424186 0.0029979976 0.0051718785 0.0035204818 0.0055521403 0.0047740741 -0.0031791342 -0.0008165675 -0.0012028510 -0.0015287718 -0.0024702186 0.0492431927 0.0127256306 0.0049088289 0.0332256063 -0.0329226457 -0.0152512677 -0.0011128346 -0.0002538526 0.0003114174 -0.0253429866 -0.0006587377 -0.0154908490 -0.0215788953 0.0180347688 0.0087389246 0.0015166823 -0.0005470938 -0.0024505368 0.0066969234 0.0025870992 -0.0027924228 -0.0006056850 0.0025362428 0.0095843233 -0.0000451115 0.0018863758 0.0070864056 -0.0075574635 -0.0048723284 -0.0078276067 -0.0178995629 -0.0026187739 -0.0006837620 -0.0007760894 -0.0085469532 -0.0162124425 -0.0023629926 -0.0012179604 -0.0018023642 0.0555732718 0.0245586471 -0.0047851255 0.0351488655 0.0244327951 0.0505420704 0.0005398438 -0.0006772649 -0.0007774501 -0.0008031933 0.0000990601 -0.0002874197 -0.0007443771 0.0004722278 0.0008719478 0.0020725896 -0.0000420495 -0.0011698503 -0.0191526951 0.0090458034 -0.0001228314 -0.0548640499 0.0005980273 0.0090523673 0.0153025043 -0.0041096841 -0.0010793457 -0.0028829615 0.0075726047 -0.0024875733 -0.0509707694 0.0008848622 0.0078730475 0.0113077666 -0.0183678462 0.0053077159 0.0011700307 -0.0012629399 -0.0005674305 0.0009740618 -0.0169555728 0.0059325264 0.0529286872 -0.0070255727 -0.0065574779 0.0751594519 0.0876978204 -0.0433407912 -0.0371575336 -0.0034159703 -0.0558084827 -0.0110280273 -0.0034976113 -0.0148943058 -0.0020434305 -0.0032456815 -0.0000237847 0.0059376361 0.0188421196 -0.0046447837 0.0231145155 0.0080688051 0.0292688480 0.0364891327 -0.0804801968 0.1171998724 0.0119836102 0.0045525481 0.0146230272 -0.0048393536 -0.0087827052 -0.0004682941 -0.0249942576 -0.0087516218 -0.0266453653 0.0083956097 0.0176031288 -0.0010221938 -0.0027204244 -0.0030422540 -0.0000085964 -0.0179229848 -0.0069612010 0.0037342323 -0.0093770709 -0.0153567440 0.0008595936 -0.0091352082 -0.0029433748 0.0019270401 -0.0017425741 -0.0048133061 -0.0028805856 -0.0036546361 0.0236144258 0.0091819917 -0.0088700929 0.0180118070 0.0188369470 -0.0157656361 -0.0022100696 -0.0013584042 0.0055186847 -0.0081117722 0.0023479945 -0.0339559708 0.0073619946 0.0016625012 0.0048766189 0.0036516797 -0.0019858536 0.0083998251 0.0061753553 -0.0037495336 0.0030124206 0.0031318164 -0.0013167453 0.0009187776 -0.0065539630 0.0063254423 0.0023400692 0.0073761767 -0.0022651924 0.0017221161 0.0060877609 -0.0039289939 -0.0041026074 -0.0074149463 0.0028729117 -0.0059869934 0.0048903938 -0.0096962197 -0.0030512255 0.0022120263 -0.0039463119 -0.0038996971 -0.0012666324 -0.0001668073 0.0013770865 0.0001364861 -0.0008734341 -0.0012131502 -0.0008803808 0.0012560355 0.0008293016 0.0006331258 0.0014486342 -0.0194492963 0.0285891476 0.0369235863 -0.0659181377 -0.0646602294 0.0162631986 0.0168497218 0.0054046835 -0.0079999663 0.0118563009 -0.0194420306 -0.0157560872 0.0027735945 0.0010911859 -0.0022158869 -0.0013601164 0.0104200132 0.0044081242 0.0017713845 -0.0227842888 -0.0099834109 -0.0185200600 0.0228005712 0.0220732513 0.0090221810 -0.0944090092 -0.0338779903 -0.0448177720 0.0289419524 0.0377729103 0.0020032141 0.1007592519 0.0399286439 0.0008416343 0.0113144066 0.0032737644 0.0001048110 0.0008184309 0.0014135996 -0.0124697367 0.0107698539 0.0062337286 -0.0034862122 -0.0049121772 -0.0000443910 -0.0000644088 0.0002807152 0.0000756613 0.0017866676 0.0004698231 -0.0004585750 0.0007690459 -0.0034005128 -0.0012318769 0.0012131868 0.0020103545 -0.0003029113 -0.0001199907 0.0014751813 0.0002808004 0.0123810975 -0.0063053658 -0.0071905461 0.0038764885 0.0096638236 0.0032692740 -0.0167042490 0.0145090967 0.0100944303 -0.0002692629 -0.0021529850 -0.0002076355 -0.0007470929 -0.0000327871 0.0004313804 -0.0038960568 -0.0037457498 -0.0016884360 0.0018729740 -0.0700180773 -0.0034036850 0.0050071465 0.0047403863 0.0022240907 0.0065929012 0.0048706569 -0.0011261975 -0.0004142849 -0.0003567641 -0.0009981016 -0.0021344424 -0.0005939123 -0.0009889953 0.0042320073 -0.0110638049 0.0120028449 -0.0574255190 0.0709382007 -0.0295618278 0.0091851170 0.0513400199 -0.1036982062 -0.0011277861 0.0104467192 0.0041553918 0.0015722115 -0.0000903559 -0.0003193814 -0.0011524097 0.0000994306 0.0004062737 0.2166523132 -0.2144314059 0.2252124608 0.0823168480 -0.3225957943 0.0736832618 0.2917911990 -0.1647926565 -0.0316998238 -0.1481642079 -0.0216279012 0.3902308487 0.1234450591 -0.1626603363 0.3924289075 -0.0808893049 -0.3253139707 0.2429438918 -0.0230065707 -0.0184823994 -0.0220940714 0.0221568999 -0.0353869210 -0.0210062851 -0.0003328805 -0.0372198606 -0.0174775225 0.0015383871 -0.0007417077 -0.0000447619 0.0003005259 0.0071314159 0.0034975703 0.0016718304 -0.0015814051 -0.0021368470 -0.0061262089 0.0037313350 -0.0021873538 -0.0000619876 0.0002072197 0.0006179398 0.0014726566 0.0002468321 0.0010950282 -0.0016354470 -0.0023206912 -0.0027256574 -0.0000283923 -0.0002556985 -0.0013319046 -0.0013253308 0.0027191551 0.0017364887 0.0096459905 0.0017335675 0.0028558543 -0.0028837345 0.0085888189 0.0027792143 0.0022365943 -0.0004873050 -0.0015892602 0.0157518707 -0.0031921152 0.0073604884 0.0136718188 -0.0142122248 -0.0057674716 0.0037054091 0.0015188304 -0.0000207192 -0.0015623433 -0.0002615762 0.0014562406 -0.0027913463 -0.0006811028 0.0016201116 -0.0014290025 -0.0015607391 -0.0027068416 0.0017132976 0.0004357504 -0.0005880306 -0.0145842148 -0.0008418053 0.0027204439 -0.0094499311 -0.0092378242 -0.0098581223 -0.0007769658 -0.0002346556 -0.0000805710 0.0019046274 -0.0004424476 -0.0038336467 0.0009222371 0.0006593493 -0.0019537043 -0.0009491393 0.0020853630 0.0027071459 -0.0009234169 -0.0007380643 -0.0012575886 -0.0000995840 0.0004141992 0.0009503436 0.0015503985 -0.0000028162 -0.0010145570 -0.0064182915 -0.0070233132 0.0037908901 -0.0063299241 -0.0089328249 0.0047029504 0.0026976524 0.0031113276 -0.0017163049 -0.0010189636 0.0029092882 -0.0009135317 0.0281683359 0.0011268320 -0.0050078189 0.0054720931 -0.0087929917 0.0024060456 -0.0015458854 0.0031850720 -0.0013943726 0.0019371374 -0.0017241806 0.0003366706 -0.0282918796 0.0073092044 0.0059946369 0.0113172028 0.0113919686 -0.0064282448 -0.0020615033 -0.0063874275 0.0017250170 -0.0011679460 -0.0052472994 0.0030871644 0.0010977039 0.0023690316 -0.0003083194 -0.0006990963 0.0006800453 -0.0015847442 0.0116852745 0.0080524107 0.0143600409 0.0007744568 -0.0039896631 0.0039429591 0.0006303513 0.0024261925 -0.0013346657 0.0005920971 0.0006169945 0.0004280340 -0.0133208398 -0.0026863587 -0.0167842014 -0.0009332546 -0.0020463833 0.0005100722 -0.0012838968 -0.0013273464 0.0004140456 -0.0064033968 -0.0040529381 0.0023133412 -0.0039328431 -0.0059648136 -0.0000169209 -0.0064241584 -0.0047475175 -0.0010704919 -0.0063663280 -0.0020337275 0.0016616787 0.0248425981 0.0244688435 -0.0102260034 0.0101130535 -0.0064465618 0.0148139449 0.0077899994 0.0073842839 -0.0138978345 0.0510164929 -0.0975051824 0.0296881831 -0.3390840622 0.0757979077 0.0141376571 0.0612193979 0.0369630884 -0.0206918271 0.0851551764 0.0659251940 -0.0328897869 0.0454298140 0.0252085453 -0.0127194024 -0.0190509459 0.0101836842 -0.0381205721 -0.0372799552 0.0585182142 -0.0933521765 -0.0295807617 0.0305198648 -0.0681714600 -0.0578122416 -0.1021226668 0.0230234804 0.2299965361 0.1245157384 0.1801676811 0.0177395021 -0.0008799162 0.0224584479 -0.0331473304 -0.0097242661 0.0046502443 -0.0057508746 -0.0063417160 0.0090571139 0.0123443611 0.0086307506 -0.0088331241 -0.0017480923 0.0041578091 -0.0081684297 -0.0073407002 0.0065800672 0.0079288920 -0.0066143787 -0.0096676532 0.0050549563 0.0018015093 0.0005493244 -0.0012528225 0.0024286605 -0.0014297638 -0.0022777522 0.0005161275 -0.0006316593 -0.0004901476 -0.0004336144 0.0013526939 0.0007649060 -0.0000891330 -0.0028389297 -0.0010484981 -0.0023428567 0.0034939330 0.0032752876 0.0004001129 -0.0093971070 -0.0047451474 -0.0024088843 0.0022453335 0.0015774719 0.0000134674 0.0085084071 0.0036653956 0.0001818501 0.0011594329 0.0003767474 0.0009170877 -0.0003309431 -0.0004523644 -0.0017940666 0.0018161400 0.0007593596 0.0001358287 0.0008306092 -0.0000477110 0.0000414920 0.0002268050 0.0000042848 -0.0003645756 0.0000422299 0.0001846327 0.0001832065 -0.0003392400 -0.0000716766 -0.0000623347 -0.0000607200 0.0000873227 0.0001076412 -0.0001863673 -0.0000810348 -0.0003619076 0.0000106944 0.0000225637 -0.0001709075 -0.0021578611 -0.0004513187 -0.0006360682 0.0001714456 -0.0002716906 0.0001150225 -0.0002317046 -0.0000444016 -0.0009907234 -0.0004183831 0.0004180412 -0.0018296083 -0.0006672100 -0.0003006816 0.0042593661 -0.0130008314 0.0028050821 0.0546450700 0.0747370526 0.0989203713 -0.0008568468 0.0009806557 0.0008450253 -0.0012870044 -0.0003347252 0.0004530189 -0.0005842851 -0.0003073383 0.0000746562 0.0003497324 0.0014609568 -0.0016541643 0.0009205595 -0.0009190989 0.0011249877 -0.0018492778 -0.0102681206 0.0229064043 -0.0002163632 -0.0049733328 -0.0043985807 0.0011511655 -0.0005492497 -0.0009648762 -0.0005497815 0.0005447638 0.0006595208 -0.0018646499 0.0000045403 0.0005493097 -0.0003076743 0.0061157939 -0.0050265210 -0.0055898365 -0.0035268089 -0.0041875332 0.0245537250 -0.0002222467 -0.0887580721 -0.0244893306 0.0276156263 -0.0885343606 0.0204134002 0.0754104686 -0.0566020468 0.0108356962 0.0125199083 0.0204623200 -0.0117975142 0.0164464151 0.0191484318 0.0041112719 0.0235966877 0.0097993462 0.0022072032 -0.0014554204 -0.0011053275 -0.0007195968 0.0002951112 0.0001712605 0.0019257455 -0.0001251070 -0.0017090465 -0.0956924303 0.0555660675 -0.0226130909 -0.0244651637 0.0064151917 0.0051728534 0.0291364520 0.0083459616 0.0243279173 0.0123409200 -0.0095538468 -0.0069202568 0.0166470619 -0.0261991694 -0.0215783947 -0.0294342214 0.0193315904 0.0116264309 0.1443566083 0.0160806985 0.0589683392 0.0832511538 -0.0319869442 -0.0066556537 -0.0013046326 0.0006243587 0.0002554223 0.1057698823 -0.0314182192 0.0095253584 0.0848482837 -0.0864806121 -0.0639469327 0.0235988690 0.0100571644 -0.0013879240 -0.0462976202 -0.0241124636 -0.0048999128 -0.0026777400 -0.0108746840 -0.0322398190 0.0188088609 -0.0035166887 -0.0438820328 0.0315537479 0.0137650988 0.0172217592 0.1668015038 0.0767919419 -0.0313966415 0.0339708280 0.0557645232 0.1195978984 0.0002226390 -0.0002736318 0.0036016383 -0.3038105498 -0.1368114032 0.0261549477 -0.2239103147 -0.1821207477 -0.3341396967 -0.0022547696 0.0024004198 0.0031159369 -0.0023057835 -0.0006315100 -0.0018052340 0.0018308041 0.0042414527 0.0054438488 0.0018149369 -0.0002280709 -0.0020330274 -0.0487116974 -0.0598539370 0.0312675207 -0.0879322000 -0.0724612033 0.0430641076 0.0326735288 0.0225932723 -0.0145272283 -0.0165329370 0.0254172348 -0.0068133334 0.1622265629 0.0120167582 -0.0321034707 0.0406185501 -0.0787963064 0.0231678105 -0.0059222872 0.0275853972 -0.0119370150 0.0163712538 -0.0237772629 0.0059669518 -0.1521904090 0.0500879286 0.0279831986 0.1173994319 0.1184636739 -0.0639444461 0.0399883872 -0.0513114294 0.1003858771 0.0042800637 -0.0487475060 0.0538329748 0.0076128762 0.0285604677 -0.0110934362 -0.0127704850 -0.0241553815 -0.0021815505 0.0756989452 0.0666013594 0.0860924382 -0.0445067671 0.0819286549 -0.1327125087 -0.0168119742 0.0113623815 -0.0363904258 0.0170196756 0.0237801679 0.0076336980 -0.0628282816 -0.0102946238 -0.0953943459 -0.0261560849 -0.0613853442 0.0101530761 0.0003775792 -0.0000228119 -0.0002506870 -0.0016919938 -0.0005972497 0.0003018362 0.0002232810 -0.0004328029 0.0006766592 -0.0012909220 0.0005189499 0.0005234630 0.0010820230 -0.0003045945 -0.0005499064 -0.0017748076 -0.0018949715 0.0008859260 -0.0004872694 0.0019980892 0.0005896768 -0.0029516198 -0.0019714636 0.0024427241 0.0171296216 -0.0338631790 0.0096798449 -0.0868821246 0.0243099406 0.0012654415 0.0181848847 0.0142705325 -0.0072462261 0.0219554183 0.0257376055 -0.0116982490 0.0030590678 0.0043688547 -0.0023192727 -0.0035938247 -0.0073266818 -0.0038116178 -0.0133579464 0.0079142595 -0.0246256172 -0.0063810293 -0.0041577646 -0.0102814387 -0.0338006513 -0.0156006371 -0.0038655689 0.0822427319 0.0346492410 0.0895026229 0.0018189057 0.0005950805 0.0051780622 -0.0048084495 -0.0008511180 0.0007935825 0.0076063952 0.0058871107 -0.0121644780 -0.0148639883 -0.0076707372 0.0118760152 0.0004921174 -0.0032603993 0.0107350825 0.0016559191 -0.0001505455 -0.0038555839 0.0077487379 0.0118012506 -0.0048725562 -0.0010738459 0.0011097243 0.0014516910 -0.0007565592 0.0015154873 0.0010789285 -0.0002686642 -0.0014151719 -0.0002589606 -0.0005667789 -0.0007538667 0.0000782725 0.0005074691 0.0014126936 0.0002041247 -0.0008333373 -0.0066072776 -0.0021676320 -0.0005678236 0.0120238106 0.0054542655 0.0018810306 -0.0017659838 -0.0011749355 0.0006629218 -0.0073846894 -0.0032739867 0.0020512257 -0.0001388239 -0.0013172653 -0.0014786875 -0.0015703172 -0.0003114559 -0.0067460574 0.0016289022 0.0101347799 0.0007022035 0.0017286084 0.0001282347 0.0001908462 0.0001831618 -0.0000707455 -0.0005927747 0.0000158389 0.0002059692 -0.0002006641 0.0002635785 0.0002230127 -0.0005637377 -0.0003201521 0.0002022149 0.0001890457 -0.0007022197 -0.0001913894 -0.0009870097 0.0002647403 0.0006769135 -0.0009230707 -0.0039668842 -0.0012091678 0.0030454305 -0.0028119805 -0.0017942172 0.0002852351 0.0011061774 0.0000907281 0.0002030134 0.0001370543 0.0000084376 0.0025088067 0.0030852504 0.0005464490 -0.0051160347 0.0034884999 -0.0001444048 0.0701786527 0.0145019242 -0.0941160867 0.0011387031 -0.0001183561 0.0002591989 0.0000672969 0.0011039264 0.0007565587 -0.0005300957 -0.0005751731 -0.0001041555 -0.0001934969 0.0005446483 -0.0007438852 -0.0024227200 0.0018766915 -0.0009820647 -0.0011622991 -0.0055294863 0.0112573600 0.0002264034 -0.0017071517 -0.0014219095 0.0001210620 -0.0001499478 -0.0001580839 0.0000779964 0.0001385114 0.0000765707 0.0145877318 -0.0035607691 0.0053319358 0.0051897220 -0.0176947049 0.0022371083 0.0127534157 -0.0015342947 0.0041247766 0.0171098871 0.0036239569 -0.0395888070 -0.0140682137 0.0171141531 -0.0486540327 0.0139002621 0.0357293199 -0.0282317954 0.0032287540 0.0034861354 0.0066680384 -0.0040339835 0.0060862788 0.0068400716 0.0007898825 0.0082769877 0.0033263754 0.0001016295 -0.0001670672 -0.0002939392 -0.0002325273 -0.0010136212 -0.0006608423 0.0003099119 -0.0002728487 -0.0001722838 -0.0274203997 0.0205921739 -0.0019614894 -0.0079713088 0.0022365806 0.0008983623 0.0122903444 0.0002623022 0.0065558869 0.0033969119 -0.0057393372 -0.0056529292 0.0010510122 -0.0077640440 -0.0081182667 -0.0098730310 0.0073242136 0.0048786642 0.0113317864 0.0043962837 0.0075091434 0.0104402242 0.0054007665 0.0086597992 -0.0005129696 0.0005071055 0.0003010539 0.0592904313 -0.0107731271 0.0141793042 0.0474878628 -0.0463541780 -0.0315459035 0.0208109768 0.0084440062 -0.0014478460 0.0235885050 0.0257247945 0.0497231502 -0.0309115896 0.0032595498 0.0558517917 -0.0587334708 -0.0298378483 -0.0023036981 0.0022955900 0.0015782650 -0.0011873812 -0.5001472923 -0.2096032005 0.1136304532 -0.2440579391 -0.2116397556 -0.3315230674 0.0017085898 0.0022658696 -0.0052588315 0.3483763114 0.1383907824 -0.0999848073 0.2489711158 0.2136654319 0.3347425363 -0.0009865662 0.0008961863 0.0011623742 -0.0002858118 -0.0001621981 -0.0002964685 -0.0022535171 -0.0032340425 -0.0027561550 0.0073063099 0.0006952892 -0.0015741175 -0.0175728358 -0.0206009371 0.0108760802 -0.0154867747 -0.0230338524 0.0117636887 0.0069280155 0.0069017658 -0.0039373573 -0.0045738322 0.0096921011 -0.0028770418 0.0706419251 0.0016884959 -0.0124653951 0.0194977773 -0.0346436159 0.0098874254 0.0007552528 0.0090786553 -0.0045324204 0.0032481504 -0.0046868326 0.0012593949 -0.0767164335 0.0203773170 0.0142456473 0.0198486569 0.0187193796 -0.0107216586 0.0119930650 -0.0104593462 0.0266888568 0.0161183450 -0.0044800840 0.0268711007 -0.0002742050 0.0023012878 -0.0024754706 -0.0036684215 -0.0058229844 -0.0014819106 0.0179260243 0.0116085638 0.0229892856 -0.0100915524 0.0129601169 -0.0250893467 -0.0000191853 0.0066206068 -0.0053619015 0.0012419654 0.0088710670 -0.0048987469 -0.0493537441 -0.0144624655 -0.0664118680 -0.0261902684 -0.0464299421 -0.0042238008 -0.0000594672 -0.0000987887 -0.0002327945 -0.0009122057 -0.0004953647 0.0000572063 -0.0005621081 -0.0012321708 0.0009404713 -0.0009058761 0.0004626617 0.0004121634 -0.0012425172 -0.0006127236 -0.0001506790 0.0014900485 0.0066816474 0.0006472957 0.0018947430 -0.0010153364 0.0019302446 0.0040214828 -0.0000090407 -0.0018120189 0.0033165829 0.0027589039 -0.0081035622 -0.0171513267 -0.0084553987 -0.0038215841 -0.0004421996 -0.0056724890 0.0034676402 0.0017297027 -0.0055697094 0.0017797814 -0.0004589256 0.0017245285 -0.0024931819 0.0049689914 -0.0055657541 0.0065672274 0.0072863194 0.0010339283 0.0107435378 0.0042818620 0.0026236059 0.0047916113 0.0072796809 0.0037270273 0.0016895815 -0.0353681886 -0.0134874769 -0.0375924913 -0.0126328908 0.0051236162 -0.0027420258 -0.0061260716 -0.0043805862 0.0034039264 0.0591491299 0.0476573340 -0.0948511355 -0.1154883577 -0.0613452609 0.0919300346 0.0074168327 -0.0274372147 0.0869856464 0.0007054851 0.0162414037 -0.0124434634 0.0410882049 0.0524154595 -0.0076380859 -0.0077353822 0.0085943186 0.0077401643 -0.0010639305 0.0051346504 0.0021817153 0.0003462203 -0.0114016833 -0.0035440447 -0.0040714969 -0.0010008033 0.0023760184 0.0056094481 0.0035684001 -0.0020204746 -0.0144982724 -0.0446495751 -0.0075676589 -0.0033746262 0.0810452335 0.0321503611 0.0122232960 -0.0070411089 -0.0116831949 0.0067874143 -0.0277313726 -0.0152946440 0.0196542488 0.0038081259 -0.0109181177 -0.0123220721 -0.0146668295 -0.0029312264 -0.0696199809 0.0213992645 0.1001318407 0.0052593832 0.0154198382 0.0011179593 0.0018424513 0.0021792185 -0.0006255819 -0.0050359543 0.0002360113 0.0018118068 -0.0017225989 0.0007026394 0.0017882380 -0.0047398302 -0.0024623978 0.0016644580 0.0017098566 -0.0060294078 -0.0016548208 -0.0042009997 -0.0003740092 0.0033550271 -0.0080730458 -0.0351540011 -0.0117866312 0.0217469341 -0.0207215938 -0.0123955455 0.0024032857 0.0095026847 0.0004065061 0.0002361588 0.0008355174 0.0004609461 0.0175173408 0.0253051993 0.0045045056 -0.0373061945 -0.0144061274 -0.0187449139 -0.0128620817 -0.0039105818 0.0177750885 0.0031179944 -0.0063937548 -0.0039435827 -0.0002374139 0.0035358578 0.0029646671 -0.0001632945 -0.0001549447 -0.0003915242 0.0016003634 -0.0014609036 -0.0011284612 -0.0571268514 0.0624326316 -0.0285625951 -0.0086780068 -0.0302513708 0.0623427443 0.0002257411 -0.0124408508 -0.0141420127 -0.0022177135 0.0008791533 0.0016483994 0.0017636453 -0.0003404320 -0.0008954554 0.2492646486 -0.1840127959 0.1994033567 0.0918004464 -0.3537734325 0.0800328212 0.3048409588 -0.1261239142 0.0110060815 0.1090712467 0.0324107412 -0.2155102605 -0.0832575898 0.0976817860 -0.2904900775 0.0988539862 0.1965656317 -0.1617638473 0.0234052306 0.0320757834 0.0664582170 -0.0315151801 0.0436194902 0.0647148120 0.0117624204 0.0717603230 0.0276430916 -0.0035708427 0.0002692492 -0.0013476825 -0.0010689845 -0.0115291989 -0.0071289579 -0.0013838686 -0.0024086387 0.0018130700 0.0174083422 0.0300350468 0.0446495125 -0.0020992286 0.0014585756 -0.0037889455 0.0258207081 -0.0194824040 -0.0097968794 -0.0028248142 -0.0180134092 -0.0232588317 -0.0327670677 0.0023181451 -0.0116961446 -0.0025750034 0.0033182816 0.0043267357 -0.2596753763 0.0041348356 -0.0930225967 -0.1227468748 0.1180123016 0.0844891495 -0.0025021118 0.0028125570 0.0024448152 0.1972115389 -0.0066122858 0.0819432231 0.1577073068 -0.1472116038 -0.0923115519 -0.0031672511 -0.0002129469 0.0008567917 -0.0046028379 -0.0046460255 -0.0087848757 0.0031183787 -0.0018148259 -0.0102943879 0.0108630961 0.0051964905 -0.0000292786 0.0001852654 0.0000402405 -0.0007830555 0.0952351343 0.0382528778 -0.0198180142 0.0414210905 0.0326355930 0.0558329342 0.0006885793 0.0005154281 0.0018286867 -0.0625381282 -0.0247322989 0.0172504130 -0.0436374776 -0.0371144628 -0.0606974195 -0.0013564771 -0.0001733800 -0.0002337085 0.0038185827 0.0006516526 0.0027024014 0.0004550483 -0.0000442198 -0.0004545616 -0.0016729612 -0.0000207827 0.0006716534 -0.0063318058 0.0032713589 0.0001341635 0.0005638108 0.0024491700 -0.0009249022 -0.0018455838 -0.0002500233 0.0003801855 0.0021138586 0.0012953916 -0.0008756931 0.0110016312 -0.0011644076 -0.0011951517 0.0075820162 -0.0086248913 0.0020083975 0.0012406816 -0.0017906409 0.0003775348 -0.0005463975 0.0001806288 0.0000721287 -0.0014277658 -0.0015759155 0.0009030569 -0.0016450044 -0.0015532978 0.0008184602 -0.0057956798 0.0023138395 -0.0109065214 -0.0049005397 0.0008782492 -0.0082328929 -0.0002217472 -0.0011507250 0.0007720851 0.0011588504 0.0034028597 -0.0006598445 -0.0036912160 -0.0037106846 -0.0057293125 0.0059504762 -0.0115246916 0.0175424073 0.0014654306 -0.0008970684 0.0029783144 -0.0009545308 -0.0034244599 0.0011918590 0.0090219197 0.0027027014 0.0129854916 0.0068108962 0.0119316208 0.0008947171 -0.0002797402 0.0008987489 0.0001616783 0.0072571155 0.0002580740 -0.0000139714 0.0006052060 0.0031071270 0.0003132884 0.0010546131 -0.0026560471 -0.0028839386 -0.0094018346 -0.0010765212 0.0034235372 0.0502793424 0.0249378601 -0.0272971364 0.0256091765 -0.0064436380 0.0283412845 -0.0063306642 0.0062857028 -0.0067674573 0.0121503053 -0.0014556695 -0.0146945050 -0.0162076865 -0.0127373170 -0.0075993902 -0.0023962867 -0.0067460442 0.0049045022 -0.0021068376 0.0000372412 0.0003803286 -0.0034314598 -0.0008357624 0.0042817110 -0.0015785767 0.0010747302 -0.0008188075 0.0000650738 -0.0017435520 0.0007595031 0.0001121295 -0.0006883998 0.0007185358 0.0015046538 0.0017607168 -0.0003015740 -0.0028831260 -0.0016274933 -0.0019023886 0.0033630048 -0.0014584237 -0.0004505308 0.0030375327 0.0002421181 -0.0020248079 -0.0203915342 -0.0169637665 0.0345123596 0.0404073331 0.0215120180 -0.0324446297 -0.0018145506 0.0102776493 -0.0313056538 -0.0174947987 -0.0044226850 0.0161727035 -0.0096884113 -0.0189693241 -0.0000463192 0.0019529155 -0.0071894855 -0.0037567883 0.0014716024 0.0125272482 0.0044175409 0.0018774768 0.0056451518 0.0006501874 -0.0016903630 -0.0050538995 -0.0008734422 -0.0059876046 0.0048472011 0.0055655888 0.0098176316 0.0230653887 0.0023144398 0.0033541022 -0.0244005474 -0.0118886341 0.0209089211 -0.0155694418 -0.0170947161 -0.0065038453 -0.0399645056 -0.0113025070 -0.0094737920 -0.0103385758 0.0022640262 0.0115371354 0.0045974152 -0.0032027254 0.0373787263 -0.0111905398 -0.0498959248 0.0011290812 0.0030626776 -0.0000610189 0.0004660278 -0.0001566146 -0.0002073853 -0.0015570519 0.0010067671 0.0008872156 -0.0003645247 -0.0007247483 -0.0000632478 -0.0009042348 -0.0003351518 0.0003554082 0.0003250653 -0.0004494856 -0.0001764050 -0.0050522772 0.0033864424 0.0018701801 0.0000311287 -0.0061037815 -0.0003576627 0.0030128738 -0.0029141308 -0.0014436995 0.0003464699 -0.0024433895 -0.0003709810 -0.0027871321 -0.0022318944 0.0007497185 -0.0092201083 -0.0131836311 -0.0014442248 0.0107352971 -0.0049750929 -0.0015385670 -0.0022756423 -0.0010747054 -0.0002139469 0.0000640871 0.0048894481 0.0024060711 -0.0013882615 -0.0012785750 -0.0003739639 -0.0012089823 -0.0007500147 -0.0000332818 0.0000938787 0.0005419216 0.0001628725 0.0156150679 -0.0166773213 0.0080387974 0.0019504858 0.0078673932 -0.0159494725 -0.0003013596 0.0029471720 0.0034679682 0.0025184730 -0.0011750818 -0.0019813454 -0.0014257446 0.0008825117 0.0012026921 -0.0701096216 0.0478812799 -0.0522658213 -0.0255282693 0.0990853828 -0.0231517983 -0.0837779823 0.0303305151 -0.0064890195 -0.0274227528 -0.0075576928 0.0565959678 0.0212758056 -0.0255636544 0.0747865548 -0.0234461407 -0.0519177557 0.0422826129 -0.0048725071 -0.0070531178 -0.0166825054 0.0074184332 -0.0105479447 -0.0156526509 -0.0016477601 -0.0175965637 -0.0064282228 0.0041313453 -0.0015758076 -0.0005138724 -0.0003323225 0.0058119404 0.0034390294 0.0029302474 0.0008359605 -0.0028294419 0.0357873389 0.0642704505 0.0908498117 -0.0130613862 0.0030056395 -0.0055591703 0.0561119485 -0.0392931041 -0.0199985999 -0.0024035851 -0.0394729052 -0.0491664184 -0.0699035653 0.0054079430 -0.0257946743 -0.0042155380 0.0080621620 0.0081587603 -0.5147533217 0.0425730813 -0.2199379121 -0.2492322848 0.2345760347 0.1794203870 0.0017558768 0.0032898209 0.0022758607 0.4141148623 -0.0181289531 0.1760111270 0.3222587381 -0.3067309399 -0.1840315469 -0.0007521496 -0.0006853402 -0.0001767082 0.0004403744 -0.0000708181 -0.0009411753 0.0013051242 0.0005425919 -0.0001662074 0.0006298506 0.0006478988 0.0009245584 -0.0008450274 -0.0004614411 -0.0001642834 0.0042427619 0.0025214457 -0.0017434991 0.0043977064 0.0040971942 0.0047287869 -0.0005467535 -0.0003285284 -0.0001954595 -0.0004593083 -0.0000588999 0.0014860246 -0.0005094172 -0.0008579793 0.0004011527 -0.0048358155 0.0050411588 0.0065006455 0.0032669713 -0.0007490803 0.0004776877 -0.0000225618 0.0002147980 0.0002650826 0.0001164931 -0.0000361930 -0.0001604656 -0.0171750008 0.0011316354 0.0030593497 0.0062674899 0.0004550964 -0.0013900410 -0.0068664206 0.0025261357 -0.0000012625 0.0049848391 0.0042631924 -0.0024943650 0.0606036867 -0.0022582805 -0.0082247250 0.0235428975 -0.0290185220 0.0075100099 0.0028592988 -0.0028312507 0.0003778932 0.0002349551 0.0026922888 -0.0009405329 -0.0272205082 0.0010316232 0.0073376575 -0.0129229922 -0.0167510828 0.0079129046 0.0002287350 0.0009987513 -0.0005867457 -0.0001208710 0.0010628418 -0.0010477269 0.0003093853 -0.0003124091 0.0005618401 -0.0000304951 -0.0001144239 0.0000367313 -0.0032282164 -0.0015390394 -0.0030482262 -0.0004344261 0.0012425846 -0.0016391375 -0.0000302621 -0.0002900618 0.0001887421 -0.0002703030 -0.0004808574 -0.0000381471 0.0028464250 0.0009136115 0.0036083770 0.0010975724 0.0023685133 -0.0001121749 -0.0000675200 -0.0012034675 -0.0001404711 -0.0065931266 -0.0008142188 0.0000913890 -0.0005657223 -0.0021768745 -0.0001466970 -0.0019468197 0.0013403723 0.0022104920 0.0024390778 -0.0005699671 -0.0015514864 -0.0143485818 -0.0039232604 0.0086488539 -0.0076369139 0.0029336200 -0.0059160905 0.0037770598 -0.0022311972 0.0004862313 0.0039759665 -0.0016951463 -0.0013825689 -0.0265038677 0.0004949368 0.0014795634 0.0034457811 -0.0013007250 0.0002649484 0.0052987285 0.0008775141 -0.0012014461 -0.0010443687 0.0044671428 -0.0010392762 -0.0016273856 -0.0032808411 0.0013640745 0.0028509470 -0.0007819865 0.0049510825 0.0023026284 0.0004262988 0.0027167591 0.0024684345 0.0025879286 0.0002430956 -0.0175485961 -0.0066382351 -0.0165796110 -0.0012890438 0.0009274014 -0.0017680388 -0.0019307703 -0.0017023460 -0.0009056866 -0.0041583813 -0.0067338358 0.0152655992 0.0131387387 0.0081275241 -0.0122069916 -0.0062743391 0.0031048445 -0.0149448355 0.3215029861 -0.1350578736 -0.3172680083 0.0817097835 0.1294554326 0.0013294974 -0.0432183016 0.0162528577 0.0310089093 -0.0528426691 -0.1677273575 -0.0346123403 -0.0360854113 0.0049043351 0.0249627661 0.0651656375 0.0466684457 -0.0230129125 0.0420759601 -0.0126336450 -0.0301877365 0.0273241972 -0.1132371822 -0.0593547630 -0.0518010788 0.1298579582 0.0691312315 -0.2527651944 0.1886802093 0.2161264318 0.0399392717 0.4176908197 0.1262534089 0.0149767507 0.0939369776 0.0264036397 -0.1046467242 0.0352928132 0.0680474225 -0.0662566799 -0.0044285224 0.0806089514 -0.0517588784 -0.1507715070 -0.0031277271 -0.0276288895 -0.0186162927 0.0094714070 0.0602673249 -0.0230301207 -0.0289899918 0.0181471059 0.0267502472 -0.0051293003 0.0506177050 0.0112956706 -0.0202165834 -0.0155308735 0.0535226557 0.0142165788 0.0666262074 -0.0286832955 -0.0271641765 0.0332235320 0.3309067820 0.0513695967 -0.1527849326 0.1497323643 0.0822816525 -0.0206312221 -0.0328074729 0.0029112680 0.0530741976 0.0336990208 -0.0182706133 0.0339599589 0.0526492267 0.0053905076 0.0261854361 0.1901859444 -0.0482903486 -0.0028385282 -0.0019020067 -0.0011166991 -0.0054364445 -0.0255212767 -0.0142235094 0.0079445770 0.0011770415 -0.0046219808 0.0111827686 0.0075761264 0.0015607023 -0.0022826844 -0.0015393070 0.0003823434 0.0010707055 0.0005515107 -0.0001554715 0.0005052857 -0.0016453830 0.0028401860 0.0000237103 0.0005271849 -0.0006178250 -0.0150606837 0.0088117098 0.0137497079 0.0073355389 -0.0070539578 -0.0081277041 -0.0054876931 -0.0022999639 0.0005366091 -0.0012007813 0.0014992729 0.0046675009 -0.0005870940 -0.0005968877 -0.0014561321 0.0038748308 -0.0023499663 -0.0295387825 -0.0046142872 0.0138275550 -0.0026927285 -0.0133099642 0.0151512041 -0.0069731604 -0.0012293516 -0.0000387280 0.0020580409 0.0003195594 -0.0007487118 0.0028682088 0.0008290123 -0.0005597568 -0.0006535834 -0.0243215875 0.0085584597 0.0038517657 0.0045981175 -0.0246996220 -0.0128412772 -0.0195221179 -0.0046663805 0.0169877643 0.0021377320 0.0083597512 0.0103271386 -0.0040857786 0.0007019050 -0.0012137613 0.0079409084 -0.0044439322 -0.0014239348 0.0010513480 -0.0043597355 -0.0051439590 -0.0082253896 -0.0000205906 -0.0036599708 -0.0007055131 0.0010659437 0.0010827528 -0.0570614412 0.0059925083 -0.0251832599 -0.0219193364 0.0225958303 0.0179742579 0.0000821607 0.0004365677 -0.0000458749 0.0492510449 -0.0025046352 0.0197721163 0.0358404938 -0.0338706817 -0.0206043930 -0.0011271469 -0.0006192193 -0.0000612853 0.0011609875 0.0003702078 -0.0002178406 0.0006816489 0.0003467413 -0.0000170338 0.0004170945 0.0003878534 0.0012449860 -0.0010088919 -0.0005894710 -0.0007035020 0.0018306237 0.0009063853 -0.0008987778 0.0034360004 0.0045158703 0.0033069270 0.0010667226 -0.0014402795 -0.0026524151 0.0039849546 0.0034273321 -0.0001568326 0.0014857331 0.0001983411 0.0026078256 -0.0004785111 0.0003838012 0.0008477482 0.0002209616 -0.0003255237 0.0000740506 -0.0001553775 0.0010237904 0.0016625542 -0.0007533771 -0.0001753696 0.0005850820 -0.0059180942 -0.0013791783 0.0015907654 -0.0014606366 -0.0021038608 0.0011902760 0.0001697247 0.0004767787 -0.0002595499 0.0000741737 0.0026033529 -0.0010048407 0.0159003786 -0.0007694747 -0.0022405688 0.0072036000 -0.0104838966 0.0028285677 0.0013044632 0.0005457198 -0.0007001417 -0.0003237057 -0.0007369768 0.0003533569 -0.0156217738 0.0030466920 0.0036916869 0.0014028189 0.0016196294 -0.0008880945 -0.0012353133 0.0016796673 -0.0034622241 -0.0013071299 0.0012963182 -0.0032500881 0.0005646089 -0.0007793825 0.0016286681 -0.0000586513 0.0009190312 -0.0007737985 -0.0059948654 -0.0042007795 -0.0072945923 0.0009963815 -0.0024732784 0.0032160056 0.0008529549 0.0001632224 0.0011923050 -0.0009395578 -0.0019066934 0.0000472697 0.0035723113 0.0015592775 0.0047939156 0.0031175907 0.0063570309 -0.0002106065 0.0000614673 0.0076970735 0.0027198271 0.0377829288 0.0093410413 -0.0013176363 -0.0000269203 0.0084400619 -0.0070570356 0.0167506296 -0.0096535415 -0.0137577901 0.0098596007 0.0066953164 0.0041990362 -0.0298877142 -0.0430296988 0.0115203868 -0.0275279313 0.0117899394 -0.0310018094 -0.0478990575 0.0051011956 0.0188540864 -0.0057578731 0.0071759289 -0.0018588097 0.0234199006 -0.0049808523 -0.0018881527 -0.0057135874 -0.0021159829 0.0015802751 -0.0039148584 -0.0055437477 0.0032931317 0.0058490168 -0.0029143112 -0.0000759828 0.0057326617 0.0045516527 0.0016580459 -0.0021917760 0.0035047452 -0.0053992664 -0.0040625501 -0.0002762650 -0.0052709609 -0.0062273327 -0.0071742806 -0.0001001987 0.0230360064 0.0091836097 0.0209623565 -0.0012107901 -0.0002397693 0.0007345065 -0.0019574404 -0.0008953079 0.0018751117 0.0128621028 0.0151180762 -0.0312432560 -0.0303006159 -0.0174857750 0.0258874030 0.0093396804 -0.0126563896 0.0316197443 -0.1641214679 -0.0119792570 0.0885360786 -0.1233352806 -0.1645828031 0.0154677760 0.0044812982 -0.0510226657 -0.0205319282 -0.0049056579 -0.0219806897 -0.0037158664 -0.0089292659 0.0857277095 0.0337928094 0.0326681623 -0.0125256004 -0.0245626001 -0.0295923405 0.0125550015 0.0256650730 0.0892422674 0.1258704586 -0.0181414694 0.0087598647 -0.2222267231 -0.0735531825 -0.0842762776 0.0316913827 0.0653504869 -0.0424410323 0.0028433843 0.0086719676 -0.0980377829 -0.0448234394 0.0529393171 0.0620863585 0.1176211044 0.0092148910 0.4255091902 -0.1169147383 -0.5367767852 -0.0446251130 -0.1139715824 0.0019232276 -0.0101650127 -0.0105663065 0.0030290367 0.0294560141 -0.0007707190 -0.0123098076 0.0141335557 -0.0078988669 -0.0087401467 0.0440792158 0.0101284910 -0.0171584796 -0.0099855443 0.0501741789 0.0116619828 0.0805148153 -0.0319343925 -0.0432753463 0.0315742364 0.3092332336 0.0445709190 -0.1873037695 0.1656247327 0.0985963540 -0.0174872354 -0.1200582952 -0.0103637655 -0.0467857439 -0.0306601652 0.0134479468 -0.0336486833 -0.0897650543 -0.0096975823 -0.0302338178 0.0944655673 0.0568085212 0.0062203384 0.0043003822 0.0025576811 0.0078140725 0.0448873916 0.0074398275 -0.0060782096 -0.0094275993 -0.0055320559 -0.0141336379 -0.0093118198 -0.0010178577 0.0041341490 0.0025382796 -0.0015921786 -0.0067642184 0.0033960269 -0.0019796098 -0.0030322551 -0.0103385353 0.0159338800 -0.0005774919 -0.0028805934 -0.0016037181 0.0146441361 -0.0061058854 -0.0099159346 -0.0088913470 0.0039381472 0.0060594379 0.0325002890 -0.0066348970 0.0117981545 0.0089139439 -0.0332836821 0.0014274306 0.0289500955 -0.0046939470 0.0091104451 0.0379966731 0.0124010932 -0.0603121491 -0.0254537970 0.0398963121 -0.0598688588 0.0168444910 0.0500955818 -0.0397548550 0.0058154813 0.0058833266 0.0081739257 -0.0050868947 0.0060838510 0.0075317698 0.0033944291 0.0138420802 0.0066561658 0.0289905694 -0.0043766588 0.0047620947 -0.0027446388 0.0315457745 0.0198339309 0.0175614948 0.0154242677 -0.0182171554 0.0058801460 -0.0021360648 0.0022405404 -0.0032105105 0.0007588078 -0.0029134368 0.0014267730 -0.0028415452 -0.0032081039 0.0005912435 0.0039971284 0.0050760483 -0.0024322295 0.0017819413 0.0013776201 0.0045632365 -0.0046306022 -0.0021577619 -0.0076129985 -0.0095980221 0.0071828043 0.0061523144 -0.0139522080 -0.0036761639 -0.0013514498 0.0013392314 0.0014309288 -0.0126318669 0.0040227276 -0.0039739092 -0.0182757896 0.0207319633 0.0100775860 0.0026586858 0.0014938245 0.0001208286 -0.0026111178 -0.0006041093 0.0014876698 -0.0012924342 -0.0008137733 -0.0005513271 -0.0005703452 -0.0012125320 -0.0029897063 0.0021821560 0.0014067551 0.0018501211 -0.0072953641 -0.0038837688 0.0029905373 -0.0058076876 -0.0064897780 -0.0032574156 -0.0009620279 -0.0002676637 0.0002265582 -0.0089008890 -0.0048029030 -0.0013478718 -0.0055602048 -0.0041984355 -0.0090457559 0.0011569753 -0.0021587375 -0.0024533269 0.0002709070 0.0003064461 0.0006333408 0.0000651375 0.0006183555 0.0006952094 0.0010530118 0.0000452068 -0.0005616148 0.0069008737 0.0038924230 -0.0025922404 -0.0013878212 0.0040523670 -0.0016901645 0.0005941526 -0.0006532571 0.0002119091 0.0007502527 -0.0041956873 0.0014497208 -0.0269448047 0.0016073286 0.0036304622 -0.0110527149 0.0177219011 -0.0049929155 -0.0027914223 -0.0013004962 0.0013946560 0.0005050987 -0.0001153150 -0.0000827250 0.0331389851 -0.0063504901 -0.0071068296 0.0040346375 0.0049389543 -0.0024334588 -0.0007359506 -0.0026745580 0.0012911457 0.0031870069 -0.0014522108 0.0061331197 -0.0027602346 0.0000965625 -0.0046557974 0.0009249772 0.0003568603 0.0011813516 0.0170650746 0.0099063064 0.0213604956 0.0024829167 -0.0050877518 0.0082932453 -0.0002609943 -0.0005725998 0.0000709255 0.0017674118 0.0042584665 -0.0006148236 -0.0113270751 -0.0056688417 -0.0136371678 -0.0098906570 -0.0195467582 0.0002120255 0.0012150590 -0.0136639967 0.0035106294 -0.0702274136 -0.0036149915 -0.0001112638 -0.0024086849 -0.0120084840 -0.0248741281 -0.0258991223 -0.0089527696 0.0126108645 -0.0078265510 -0.0132804777 0.0004029751 0.0498664860 0.0454908484 -0.0163463554 0.0148252536 -0.0057383123 0.0329622431 0.0468451241 0.0078927758 -0.0380552347 -0.0621428581 0.1000543530 -0.0320991531 0.1878095417 -0.0557212546 -0.0062222454 -0.0603236887 -0.0321403650 0.0193248389 -0.0145169497 -0.0678294181 0.0344707982 0.0759461659 -0.0196653627 0.0035121593 0.0594807039 0.0349677345 0.0451810755 -0.0015621174 0.0599501403 -0.0426629441 -0.0394949879 0.0074610602 -0.0648743101 -0.0821730482 -0.1012577534 0.0039307832 0.1728290529 0.0859947842 0.1496755415 -0.0194744395 0.0067748798 -0.0265793251 -0.0310971545 -0.0141028150 0.0048719762 -0.0047115561 -0.0021530466 0.0029095605 0.0110164222 0.0059653699 -0.0071155668 0.0029405799 -0.0010484323 0.0037207854 0.0279833079 -0.0059106464 -0.0253653079 0.0149387911 0.0176167218 -0.0005557898 -0.0029405709 0.0032462333 0.0027692334 -0.0022991323 -0.0025799422 0.0001480991 -0.0001845383 -0.0062214864 -0.0016705239 0.0001464410 0.0018223445 0.0005172573 0.0032291249 0.0003093730 -0.0020476441 -0.0041411849 -0.0121525502 -0.0010551089 -0.0032173138 0.0233217733 0.0064572316 0.0018072509 0.0016708537 -0.0004767473 0.0041894492 0.0058901728 0.0008339877 0.0095193600 0.0067381355 -0.0039780946 -0.0093282831 -0.0100602478 0.0013917956 -0.0418223485 0.0104212574 0.0514026492 0.0022128214 0.0056234674 -0.0001585162 -0.0005120785 -0.0000947053 0.0001896268 -0.0003365326 -0.0011280243 -0.0000517080 -0.0007303641 0.0029861062 0.0009643378 -0.0020765023 -0.0010897396 0.0006613145 0.0004081690 -0.0025290168 -0.0005580389 -0.0079691867 0.0035062961 0.0043243128 -0.0025387804 -0.0187248680 -0.0036818551 0.0150644076 -0.0125502908 -0.0076930912 0.0008769320 0.0099428680 0.0010160257 0.0074208488 0.0046569158 -0.0023814688 0.0018328056 0.0084337187 0.0015404440 0.0070684000 -0.0062673319 -0.0212856492 0.0782752570 0.0575767665 0.0238375967 -0.0004376994 -0.0036251795 -0.0006492666 0.0020508900 0.0015745710 0.0002953957 0.0005423961 0.0002311317 -0.0001490572 -0.0005642788 -0.0003460860 0.0007923308 -0.0025074757 0.0027759292 -0.0015658049 -0.0002403939 0.0014734661 -0.0005304969 0.0004159954 -0.0003515053 -0.0009376005 -0.0016382182 0.0005295815 0.0010680399 0.0008932597 -0.0004631949 -0.0006793263 0.0135613060 -0.0076931898 0.0083137071 0.0045654285 -0.0179224468 0.0046034186 0.0128596247 -0.0019637264 0.0027680445 -0.0077964764 -0.0030442976 0.0076410695 0.0031738940 -0.0129544863 -0.0068653514 0.0120903794 0.0001147869 -0.0030272852 -0.0007250134 -0.0000146604 0.0041608773 -0.0007081314 0.0012797320 0.0027035377 -0.0014651643 0.0028020544 0.0002067323 -0.0031734033 0.0012790652 0.0004702059 0.0005307361 -0.0019599090 -0.0013958575 -0.0021926307 -0.0005299579 0.0022466486 0.0813916966 -0.0341123170 0.0253686296 0.0210205257 -0.0048960311 -0.0005585874 -0.0174481208 -0.0125265223 -0.0238378707 -0.0110084913 0.0082895412 0.0053616476 -0.0203567898 0.0221980442 0.0157835994 0.0286896122 -0.0234872397 -0.0136878905 -0.1532627065 0.0009974013 -0.0720554156 -0.0930360793 0.0479971082 0.0214801327 -0.0006942549 0.0001986000 0.0004103506 -0.0633945163 0.0269080761 0.0013969354 -0.0566853652 0.0617023418 0.0401654027 0.0282570846 0.0132789614 -0.0000716378 -0.0243926310 -0.0053317803 0.0231951050 -0.0148718807 -0.0085664285 -0.0066553136 -0.0117928171 -0.0156894276 -0.0338811821 0.0261545278 0.0171085847 0.0245254711 -0.1175025888 -0.0472233739 0.0351594448 -0.0860532054 -0.0541364497 -0.0560656914 -0.0001867224 -0.0002034235 -0.0000572855 -0.0834283193 -0.0462776622 -0.0222243716 -0.0641792876 -0.0571347156 -0.1035095802 0.0023157906 -0.0028474260 -0.0036938841 0.0029393745 0.0008817030 0.0024452636 0.0007298784 0.0029330462 0.0045451986 0.0049208523 0.0000576224 -0.0026863155 0.0641728684 0.0402807921 -0.0252109919 -0.0376580461 0.0389378159 -0.0131392584 0.0127805887 -0.0014883293 -0.0011812728 0.0105166974 -0.0446099786 0.0149697622 -0.2764956870 0.0236712990 0.0361777295 -0.1238802135 0.2080857831 -0.0585500027 -0.0402993536 -0.0128716039 0.0159999592 0.0080544478 -0.0102120156 0.0018286947 0.3950803740 -0.0721049145 -0.0796880430 0.0864931525 0.0998837271 -0.0507603159 -0.0223188548 -0.0327491747 -0.0055245024 0.0385469193 -0.0147199048 0.0717589196 -0.0331423571 -0.0038376630 -0.0524104525 0.0104759508 0.0127408669 0.0067493552 0.2147510162 0.1205084984 0.2777444911 0.0423455798 -0.0980874203 0.1471636691 0.0065054245 -0.0019016787 0.0109395734 0.0180391554 0.0493639126 -0.0110094926 -0.1662915698 -0.0774639088 -0.1973599238 -0.1292382737 -0.2499216568 -0.0005870604 -0.0001493880 0.0008409189 -0.0004731955 0.0058537167 0.0003833061 -0.0004776522 0.0006921269 0.0016029571 0.0028794350 0.0017271908 0.0014332148 -0.0004219842 -0.0009746307 0.0007194310 0.0006154790 0.0025852492 0.0010443130 -0.0017268699 0.0033288569 -0.0035226494 -0.0010355359 -0.0001018797 0.0015810012 -0.0006620555 -0.0018980111 0.0018021111 -0.0001257845 0.0030481642 0.0002698274 0.0003380236 -0.0010919921 0.0001793603 -0.0000771135 0.0015146883 -0.0005180588 0.0001381515 0.0017786828 -0.0001403729 -0.0000327876 -0.0001333056 0.0000151534 0.0001777558 -0.0001269500 0.0016458864 -0.0011961136 0.0001590306 0.0015338388 -0.0010352946 0.0003864010 -0.0017433866 0.0015569741 -0.0016301430 0.0004578148 -0.0039295244 -0.0005816678 0.0008247045 -0.0006335712 -0.0010730297 0.0000398547 0.0001009316 -0.0016979950 -0.0039556901 0.0066674014 0.0053266339 0.0040869795 -0.0046736167 -0.0049863204 0.0051595977 -0.0071559712 -0.1847727765 0.0469766727 0.1482998255 0.2035094685 0.2310161993 -0.0442824103 0.0207025808 0.0682625926 0.0114080730 0.0712532527 0.0499919813 -0.0290806604 0.0062569886 -0.1650557884 -0.0577331095 -0.0921876536 0.0419323238 0.0720148760 0.0290413721 -0.0419710763 -0.0357229358 -0.0907048710 -0.0888784418 0.0277130384 -0.0267135667 0.4512721927 0.1507875220 0.2620368177 -0.0976441825 -0.1966132542 0.0362973565 -0.0697977500 -0.0428367835 -0.0553137446 -0.0454812103 0.0230135771 0.0570952001 0.0755656338 -0.0014598186 0.1833935140 0.0062840395 -0.2671561609 -0.0449777186 -0.0707324812 0.0081015410 0.0096575841 0.0030173053 -0.0036447640 0.0016677199 0.0107973103 0.0013154054 0.0080468115 -0.0261068438 -0.0084786608 0.0326743101 0.0027141286 -0.0130545456 -0.0009781188 0.0398555052 0.0062850886 0.1594133930 -0.0883594074 -0.0849061348 0.0248844242 0.2996000679 0.0461275480 -0.1947245423 0.1537036914 0.0996570837 -0.0095747963 -0.1743268226 -0.0219062754 -0.1057419460 -0.0667981810 0.0346722459 0.0239247294 0.0748086271 0.0118580828 0.0097085113 -0.0921557678 -0.0345830220 -0.0020721784 0.0006323175 0.0054839702 0.0014467935 0.0280561398 0.0044357065 0.0032980064 -0.0102997215 -0.0087962281 -0.0083150691 -0.0046233504 -0.0003445576 0.0020376239 0.0000477118 0.0005343075 -0.0007533514 0.0000617135 0.0002927621 -0.0008119892 0.0032465196 -0.0050528735 -0.0000460148 -0.0002613743 -0.0008469163 0.0044851298 -0.0009565722 -0.0024559947 -0.0042525783 -0.0009058309 0.0010470841 0.0029223358 0.0016412045 0.0004852954 0.0006792974 0.0015689777 -0.0060979223 -0.0031454247 -0.0004954279 -0.0015479863 -0.0016552396 0.0044439272 0.0229621204 0.0043404191 -0.0070083731 0.0148008453 0.0043372370 -0.0280039021 0.0182200391 0.0002064812 0.0013132352 0.0044749931 -0.0002711766 0.0003173835 0.0004996862 -0.0012176863 0.0019426514 -0.0001084701 0.0128729260 0.0057347244 0.0130865855 0.0017533530 0.0242557484 0.0152866825 0.0031461528 0.0191400035 -0.0051933753 0.0004229902 -0.0048072786 -0.0047616898 0.0081062649 -0.0008758313 0.0041373956 -0.0048058351 0.0029853773 0.0019918584 -0.0029507202 -0.0041167846 -0.0062533162 0.0036857029 0.0004845878 0.0018118374 -0.0030856088 0.0043507540 0.0026363383 -0.0053381549 0.0054660185 -0.0073852954 -0.0093174226 0.0138385698 0.0017822275 0.0015632172 0.0001081527 0.0000339560 -0.0005902828 -0.0005158736 0.0013684322 0.0079710500 -0.0086447995 -0.0025946839 0.0035692760 0.0013308338 -0.0020789347 -0.0007115238 -0.0010993700 -0.0029079498 -0.0029305286 0.0002705316 0.0052873627 0.0021559060 0.0006701749 -0.0007827151 -0.0010925631 -0.0018572143 -0.0038880988 -0.0004718047 -0.0014126703 -0.0011399593 -0.0025975028 -0.0033734302 -0.0059130876 0.0004516931 0.0026075385 0.0030325608 0.0010502086 0.0028205021 -0.0015595671 0.0036833183 0.0034649697 0.0027106650 -0.0005566853 0.0005042170 0.0009625874 0.0001154754 -0.0004789709 -0.0005612240 -0.0001133080 -0.0024410597 -0.0028260117 0.0002954080 0.0000359447 -0.0001130781 0.0014635674 -0.0002177613 -0.0001573292 -0.0018941092 -0.0002640899 0.0003594408 0.0012914662 0.0004067462 -0.0003576800 -0.0000258183 -0.0010492833 0.0004075783 -0.0067487101 0.0011132351 0.0005864600 -0.0041056933 0.0066440024 -0.0019058593 -0.0015537928 0.0004268938 0.0001769128 0.0001619063 -0.0008951211 0.0002891669 0.0088128379 -0.0008411485 -0.0018658496 0.0046760746 0.0054958954 -0.0028752667 0.0001552262 -0.0008175698 0.0008577683 -0.0008703086 -0.0010913984 -0.0001448644 0.0003783425 0.0007065671 0.0000818634 -0.0000820361 -0.0003657240 0.0001571703 0.0003276848 0.0007004930 -0.0000501018 -0.0005490930 0.0015140406 -0.0022140929 -0.0004815349 0.0000430993 -0.0007838688 0.0002630086 -0.0000424909 0.0004518045 0.0015147884 0.0008141640 0.0014521430 0.0014619343 0.0022915725 0.0003694452 0.0025286735 -0.0076243497 0.0016715386 -0.0458664124 0.0012057291 -0.0029514066 -0.0038007316 -0.0154147681 -0.0116504025 -0.0234759770 0.0010887539 0.0130619015 -0.0037577311 -0.0068961370 0.0003941446 0.0324756118 0.0209188336 -0.0135854404 0.0084974483 0.0012992964 0.0240877235 0.0333518541 -0.0081039039 -0.0089810624 -0.0634803083 0.0124620742 0.0034464725 0.1661313090 0.0223382760 -0.0234196963 -0.0454067077 0.0329427171 -0.0072708426 0.0259967311 0.0186868996 -0.0069872499 0.0600305546 -0.0249627032 0.0059278969 -0.0221022788 -0.0103891480 -0.0229938517 -0.0322649670 0.0447055025 -0.0765888859 0.0359344066 0.0800311649 -0.0140785051 0.0693257326 -0.0163700074 0.0869822539 -0.0762660403 0.0277054374 -0.1718131655 0.0117018916 0.0056471968 0.0116368608 -0.0226660277 -0.0030867661 0.0029875615 0.0008555578 -0.0011326221 -0.0007586342 0.0005100518 0.0011523125 0.0006498436 -0.0002920769 0.0007956268 0.0007267871 0.0086892745 -0.0047181402 -0.0101769948 -0.0048703693 -0.0030122821 -0.0013973181 -0.0016466325 -0.0025615375 0.0002933939 -0.0024045281 -0.0033721453 0.0002808385 -0.0008331951 0.0054896329 0.0024227502 0.0036462233 -0.0010872643 -0.0026465746 -0.0007003202 0.0018341792 0.0011839289 0.0049111526 0.0011785224 -0.0027131421 -0.0007611511 -0.0072069619 -0.0026415090 -0.0100323168 0.0044588208 0.0078695623 -0.0008535926 0.0029480628 0.0016839153 -0.0002917684 0.0023573251 0.0011145594 -0.0023661496 -0.0017382448 0.0009622192 0.0029849368 -0.0062157712 -0.0018001661 0.0026934920 0.0022358638 -0.0009221570 -0.0035207385 -0.0018976304 0.0012440773 0.0031234898 -0.0026557767 -0.0017115067 -0.0003703944 0.0043110484 0.0009478266 -0.0006781603 -0.0003253730 0.0001812330 -0.0006203653 -0.0010622134 0.0001151750 -0.0213952029 0.0127911706 0.0109420264 -0.0021013349 -0.0262931877 -0.0049806560 0.0149043193 -0.0105366766 -0.0074135220 0.0000500987 0.0178959770 0.0025873823 0.0139044226 0.0088785662 -0.0047994359 -0.0007814082 -0.0016874550 -0.0000523918 -0.0003404954 0.0013392802 -0.0035522521 -0.0962204851 -0.0111835823 0.1136634912 -0.0002193918 -0.0006813861 -0.0000743714 0.0008313404 0.0001626828 -0.0002740976 0.0001058780 0.0001014947 0.0000002220 -0.0003267930 -0.0001230853 0.0001272798 -0.0007633305 -0.0002521812 0.0000971463 -0.0000157530 0.0001526693 0.0001930166 0.0002457810 -0.0000709460 -0.0002293923 -0.0005160368 0.0002675572 0.0004013387 0.0001729879 -0.0002652170 -0.0002643748 0.0090244543 0.0056656061 -0.0024438509 0.0031929315 -0.0066446849 -0.0034767313 -0.0007087857 0.0058058157 0.0046722261 -0.0012986598 -0.0006285719 0.0006678000 0.0004106336 -0.0024405981 -0.0028202217 0.0031672436 0.0011062645 -0.0015871753 -0.0006454460 -0.0004689832 0.0013239129 -0.0000708376 0.0003096081 0.0007755878 -0.0009514920 0.0011025335 0.0000927994 -0.0007381094 0.0005479343 0.0005240175 0.0003061916 0.0001185890 0.0000931950 -0.0007552950 0.0003552541 0.0006278745 0.0360194275 -0.0285104025 -0.0166004577 0.0290703601 0.0009707002 0.0175289645 -0.0105020477 -0.0009269459 -0.0051939590 -0.0152225191 -0.0147790080 -0.0239430367 -0.0018964677 0.0145892439 0.0151357580 0.0072205585 0.0034378991 0.0074855719 -0.1079349058 0.0176672008 -0.0474303563 -0.0707352318 0.0560784802 0.0297304876 -0.0000168613 0.0003611563 -0.0004759249 -0.0016659721 0.0136728092 0.0206857332 -0.0066312025 0.0214564932 0.0181035830 0.0766011755 0.0239724723 -0.0578649294 -0.0010848287 -0.0173316605 -0.0629611586 -0.0517511595 0.0193552990 0.1477401989 0.0499335694 0.0201695941 -0.0102711181 -0.0394670498 -0.0575378181 -0.1141477578 -0.0642132774 -0.0495344313 -0.0301217610 -0.0219033205 -0.0453879613 -0.1044542318 -0.0039722301 0.0046142083 -0.0022732953 0.1890082121 0.0843967405 -0.0452141027 0.1291696322 0.1252000335 0.1211800504 -0.0011942853 0.0005404265 0.0006054063 0.0046451292 0.0005951748 0.0027974376 -0.0062274854 -0.0104915069 -0.0126930866 0.0146912169 0.0016729351 -0.0029775895 0.0602700671 -0.0283766140 0.0024827881 -0.0533505527 -0.0152637072 0.0138650480 0.0478266535 0.0157266723 -0.0137378823 -0.0065519528 -0.0373813102 0.0152037003 -0.2265428082 0.0399832147 0.0203384312 -0.1439817309 0.2201969074 -0.0605086605 -0.0454712429 0.0200561012 0.0032310611 0.0055531728 -0.0246606189 0.0075545952 0.2629139168 -0.0194595847 -0.0658643080 0.1334795555 0.1589896409 -0.0802533745 0.0281929020 -0.0341833290 0.0710716773 -0.0707333450 -0.0747304599 -0.0333677488 0.0392976671 0.0527912993 0.0231091409 -0.0066227959 -0.0375549110 0.0177079826 -0.1030444749 -0.0127740274 -0.1663643349 -0.0691409248 0.1851466861 -0.2536430896 -0.0461641077 0.0009643417 -0.0723153630 0.0078666166 -0.0305803104 0.0362587963 0.2035317469 0.1045451803 0.2207833420 0.1700585746 0.2987776674 0.0274429669 0.0000241137 0.0002642681 -0.0000016650 0.0000649871 0.0001156304 0.0000317053 -0.0004017704 -0.0005258414 -0.0007082158 0.0014335982 0.0001519768 -0.0003158302 0.0007882278 -0.0006709056 -0.0001339597 -0.0037899147 0.0074379530 0.0069807659 -0.0018927573 0.0009984997 -0.0012861543 -0.0063714956 0.0040146615 -0.0046547664 0.0040227935 0.0005745039 -0.0011239187 -0.0070321939 -0.0030265475 0.0007850243 0.0017125930 -0.0028325338 0.0010173830 -0.0025815708 -0.0019908287 0.0011949134 -0.0014530703 0.0003141207 0.0000107451 0.0015730437 0.0018301844 0.0005829099 0.0001453686 -0.0010659546 0.0008722256 -0.0016004537 -0.0015540212 -0.0007234035 -0.0012261634 -0.0005663208 -0.0012928284 0.0044313640 0.0002984515 0.0050831820 -0.0004145100 -0.0000133638 -0.0001361781 0.0006943819 -0.0000572659 0.0000938796 0.0010820049 0.0007401299 -0.0016720983 -0.0020760112 -0.0008674878 0.0016311133 -0.0006967432 -0.0009070393 0.0017511456 -0.0528016374 -0.0025426475 0.0200360982 0.0314418732 0.0499861676 -0.0024486647 0.0036363633 0.0214953355 0.0052750508 0.0164054694 -0.0381758569 -0.0267140124 -0.0126945547 -0.0389443108 -0.0045346400 -0.0037387531 0.0271904836 0.0122306160 0.0099056254 -0.0320312315 -0.0180056026 -0.0023119487 -0.0225078708 -0.0091968499 -0.0246131845 0.1257132616 0.0503027846 -0.0193455077 0.0384705137 0.0239624042 0.0067980196 0.1432915880 0.0450023166 -0.0619801298 0.0150001424 0.0502377655 0.0100817812 0.0245821948 0.0067284217 0.2931150773 -0.1743502961 -0.3181951167 0.0524378154 0.0255571136 -0.0204371033 -0.0585981007 -0.0308300358 0.0209445224 0.0559438174 -0.0422487170 -0.0296249452 -0.0060195119 0.0548710401 0.0118911130 -0.0098557750 0.0042946892 0.0038733804 -0.0156704175 -0.0186641021 0.0041667822 -0.3819526699 0.2347059105 0.1932824203 -0.0258215867 -0.4265573568 -0.0703443672 0.2201777581 -0.1448910623 -0.1068731759 -0.0041925371 0.3152913503 0.0479851159 0.2221003605 0.1437191656 -0.0766436841 0.0081219678 0.0125560699 0.0024651401 0.0027758120 0.0662183605 -0.0042415558 -0.0000686491 0.0006255037 0.0033643747 0.0039844993 0.0224875678 0.0041151520 -0.0010005445 -0.0089993743 -0.0057292508 -0.0050935315 -0.0027705702 -0.0000939189 0.0018221532 0.0008428364 -0.0000074913 -0.0011279705 -0.0002982180 -0.0000172967 0.0000745230 0.0008410052 0.0002353359 -0.0004068584 -0.0007759210 -0.0003329213 0.0047291108 -0.0014636394 -0.0032115965 -0.0036324378 -0.0002471896 0.0014463382 0.0049673453 0.0025416957 -0.0005922954 0.0003743681 -0.0009389405 -0.0031529441 0.0010743840 0.0010675516 0.0018083347 -0.0093133114 -0.0052555361 0.0029547369 0.0045266446 -0.0142325751 0.0011136545 0.0024305650 0.0044941934 -0.0040473271 0.0021766569 0.0022612924 0.0020230461 -0.0012362565 0.0012600372 0.0000212762 0.0006170041 0.0025616889 0.0012955251 0.0106936097 0.0045416179 0.0106103343 0.0004574330 0.0200860851 0.0109470808 0.0043441322 0.0152885847 -0.0055698202 -0.0003695599 0.0048796547 0.0054594960 -0.0065868902 -0.0000159264 -0.0040984740 0.0031553977 -0.0024698089 -0.0015344575 0.0024879143 0.0043616959 0.0062949865 -0.0033981668 -0.0006925725 -0.0020650031 0.0027400919 -0.0042367629 -0.0029599831 0.0097150541 -0.0040514139 0.0057901643 0.0072554896 -0.0066824677 -0.0038844167 -0.0009348741 -0.0006523805 -0.0009434353 -0.0013215350 0.0004274051 -0.0026876448 -0.0053053426 0.0050002351 0.0008071708 0.0024147118 0.0011424354 -0.0008057773 -0.0012906481 -0.0009664581 -0.0015506090 -0.0014428792 0.0000038151 0.0022438742 0.0017054345 0.0004925786 -0.0007531626 -0.0005936824 -0.0008112387 -0.0015471082 -0.0007276447 -0.0014099089 0.0002369287 -0.0008184854 -0.0013002787 -0.0010063092 0.0002925060 0.0007203218 0.0007242860 -0.0034466968 0.0000184867 -0.0002497927 0.0002636694 0.0002312517 -0.0004437550 0.0003531715 0.0000900204 -0.0000644597 -0.0002441885 0.0002366322 0.0003935197 -0.0000590605 -0.0006870075 -0.0006482907 0.0001313435 -0.0000036151 0.0000280939 -0.0033258409 0.0025323076 -0.0005219759 0.0026349907 0.0016228314 -0.0011079696 -0.0034934439 -0.0007173900 0.0008497864 0.0009542968 0.0016262566 -0.0007727450 0.0131722717 -0.0021672576 -0.0012950282 0.0081361499 -0.0117367443 0.0031080092 0.0019660837 -0.0017296494 0.0002653670 0.0001958386 0.0016466411 -0.0006176877 -0.0093622599 -0.0005088840 0.0025506325 -0.0074117778 -0.0094152829 0.0046460735 -0.0006362087 0.0004704483 -0.0013841324 0.0014399826 0.0015800409 0.0007562350 -0.0012922743 -0.0010546147 -0.0013261724 0.0003857273 0.0007921895 0.0000269456 0.0045926477 0.0017810939 0.0065112002 0.0018544186 -0.0041954373 0.0061397066 0.0006002870 -0.0005401414 0.0013829924 0.0003021355 0.0012788910 -0.0005407011 -0.0036137275 -0.0024455217 -0.0036911507 -0.0040606367 -0.0077164685 -0.0002448229 -0.0009759171 -0.0051838986 0.0029886012 -0.0381535979 -0.0113915994 0.0080391000 -0.0018142722 0.0013481305 -0.0311488369 0.0108039237 -0.0150195034 -0.0065535330 -0.0044334528 -0.0050177375 0.0002857955 0.0239726539 0.0147779289 -0.0113787999 0.0105536977 -0.0033339899 0.0176092343 0.0292802914 -0.0032396363 -0.0104055283 0.0846879309 0.0312784063 -0.0440193975 -0.1407286227 -0.0789181649 0.0052419289 0.0202171760 -0.0656524001 0.0281377914 -0.0539762562 -0.0431778920 0.0282300359 -0.0003424748 -0.0173778263 0.0117805535 0.0270515037 0.0351029611 0.0076428165 -0.0118523413 0.0111203475 -0.0277484643 -0.0115358968 0.0181633662 -0.0271473143 0.0092466879 -0.0306204647 0.0292314627 0.0429986778 0.0284163655 0.0028014558 -0.0031491007 0.0018915419 -0.0059186984 0.0061679330 -0.0051270952 0.0001512243 0.0017123590 0.0016403421 -0.0002431991 -0.0019251944 -0.0015855269 0.0013847152 -0.0011999776 -0.0009636298 -0.0002426597 0.0019854470 0.0053499601 0.0048285683 -0.0022212389 0.0042497877 0.0007819690 0.0032950791 0.0069164834 0.0005843895 -0.0021817298 0.0013026297 0.0023225423 0.0008159270 -0.0093374408 -0.0033930954 -0.0033227721 0.0023554157 0.0028097707 0.0033942560 -0.0060012946 -0.0045967201 -0.0100022103 -0.0053768386 0.0026905283 -0.0013012025 0.0096414508 0.0018508398 -0.0007202835 0.0017457330 0.0013424800 0.0039571564 0.0224184989 0.0076399780 0.0038082999 0.0013694447 -0.0024260626 0.0019799923 -0.0057723290 -0.0023969159 -0.0278664560 0.0153327567 0.0278154098 0.0049630117 0.0059942529 -0.0015883213 0.0212710942 0.0121376322 -0.0073932207 -0.0199778759 0.0133269297 0.0104979362 -0.0001458481 -0.0218895313 -0.0034312303 -0.0091813948 0.0050992256 0.0047972732 0.0012183056 -0.0106341145 -0.0020594858 0.0634166435 -0.0395252729 -0.0333304408 0.0046273562 0.0735326644 0.0151535312 -0.0214217590 0.0126794034 0.0100986107 0.0002705987 -0.0390396598 -0.0057892155 -0.0508849683 -0.0325361063 0.0176260472 0.0051080498 0.0028510744 -0.0003746802 0.0014205127 0.0448365420 0.0105652369 -0.0439997045 0.0086638078 0.1100509281 -0.0012822420 0.0001031035 0.0007595491 0.0002736987 -0.0003891376 -0.0000933500 -0.0001303803 0.0000131660 -0.0000579295 0.0000336729 0.0003044478 0.0003738972 -0.0005370859 -0.0006965754 -0.0004720476 0.0001147218 0.0037253565 -0.0010395023 0.0001986415 0.0005211808 -0.0003482855 0.0001832075 -0.0002579324 -0.0003802661 0.0000073258 0.0002392907 0.0002571092 0.0030470138 0.0056131873 -0.0045343027 -0.0001690850 -0.0038880650 0.0032256111 0.0033589329 0.0066506921 0.0068733992 -0.0271628845 -0.0147786656 0.0120597494 0.0109919289 -0.0352995525 -0.0026180054 0.0132547888 0.0027079391 -0.0034856981 -0.0061852761 -0.0053815058 0.0002490302 0.0035967401 -0.0067618435 0.0019804150 0.0006062604 0.0028393788 0.0007894477 -0.0010875099 0.0000362475 -0.0003598097 0.0000846057 0.0020639120 0.0003223621 -0.0000762298 -0.0009430897 0.0003913790 0.0276343664 0.1772650804 0.2146843477 -0.1936575325 -0.0164174199 -0.1358614441 0.0797346442 -0.0826838970 -0.0663434155 0.0828003938 0.1672879523 0.2333208354 -0.1172283538 -0.0273013511 -0.0759190506 0.0897740313 -0.1583234441 -0.1183800538 0.3331334007 -0.1065261878 0.1291629392 0.1455354471 -0.1842728709 -0.0925950166 -0.0043122351 0.0002189481 0.0077585398 -0.1239847205 0.0054576925 -0.1204632257 -0.1684070513 0.1370914963 -0.0006699851 0.0784327699 0.0299858296 -0.0431607292 -0.0217072847 -0.0232013881 -0.0489081261 -0.0467879448 0.0107470543 0.1110446123 0.0506916431 0.0175908310 -0.0225605889 -0.0266643084 -0.0398926763 -0.0791074990 -0.0802641402 -0.0564090120 -0.0057475734 -0.0285686764 -0.0353951437 -0.0632643791 -0.0038964128 0.0031470687 -0.0009145540 0.0620227096 0.0262513804 -0.0284459234 0.0584621315 0.0571589408 0.0382344959 0.0202793481 -0.0168193691 -0.0208696498 -0.0269779916 -0.0009647255 -0.0129104901 -0.0044266571 -0.0065825547 -0.0075232640 0.0135768725 0.0013635189 -0.0036079648 -0.0655760250 0.0494162738 -0.0091425012 0.0339737051 0.0399845423 -0.0230395458 -0.0735037449 -0.0070622223 0.0146517113 0.0260591097 0.0257879155 -0.0141899818 0.2732949466 -0.0356217425 -0.0288529499 0.1545332605 -0.2097127120 0.0550129965 0.0250818538 -0.0394400533 0.0108820715 0.0123110051 0.0293622570 -0.0126984072 -0.0820095894 -0.0311397996 0.0315785386 -0.1200645999 -0.1658940677 0.0805585245 -0.0021690883 -0.0134642168 0.0074542794 -0.0096394977 -0.0129491660 0.0004833334 -0.0070328002 0.0087807585 -0.0200808964 0.0062068799 -0.0035234446 0.0125061244 0.0546138928 0.0431125260 0.0658309589 0.0031069691 0.0115693972 -0.0028994305 -0.0150688908 -0.0117841351 -0.0138984955 0.0122264257 0.0112725555 0.0097804725 0.0365985047 0.0074593453 0.0465743017 0.0073437933 0.0006426860 0.0123666323 0.0015905441 0.0010424886 -0.0009063337 -0.0030821481 -0.0013860072 0.0012068967 -0.0016706691 -0.0067152971 0.0055101025 -0.0088437683 0.0011685192 0.0013775502 0.0014990482 -0.0007984274 -0.0004153026 -0.0048241063 0.0055635985 0.0070097414 -0.0030378944 0.0019439661 -0.0019907328 -0.0055537918 0.0023922080 -0.0032230829 -0.0099172139 -0.0021227804 0.0024749609 0.0113537707 0.0079307090 -0.0027285855 -0.0030843205 0.0073237805 -0.0025785398 0.0084875102 0.0050814822 -0.0034451078 0.0006418626 0.0004687547 -0.0002619709 -0.0037861558 -0.0043623365 -0.0014933146 0.0013179051 0.0003537312 0.0022947123 0.0019558278 -0.0006499448 0.0028057149 -0.0005992170 0.0023098103 -0.0018819157 -0.0071734864 -0.0031038972 -0.0042489023 0.0002080406 0.0001511589 0.0006862759 -0.0014414854 -0.0002385869 -0.0005839317 0.0000598767 -0.0012797445 0.0039203085 0.0018282669 0.0014180798 -0.0023931012 -0.0034982995 -0.0003953309 -0.0047537880 -0.0967814628 0.0597121767 0.1024387025 0.0397919740 0.0806859951 0.0058849070 -0.0350313273 0.0101335187 0.0243099342 -0.0456286038 -0.1034539081 -0.0102703841 -0.0216452331 -0.0029743298 0.0128553509 0.0572724150 0.0233860113 -0.0264784038 0.0183114954 -0.0142474682 -0.0158187015 0.0308598723 -0.0649143931 -0.0472519473 -0.0333610487 0.0998356441 0.0489048726 -0.1664072245 0.1235399528 0.1428195338 0.0105914835 0.3076043713 0.0964650661 -0.0629991962 0.0373681343 0.0572094652 0.0157431807 0.0112191089 -0.0037367658 0.3111622877 -0.2026242661 -0.2952100897 0.1681336392 0.0955865378 -0.0622454230 0.1745130365 0.1065968621 -0.0596966842 -0.1572182230 0.1032107160 0.0816434212 -0.0050059790 -0.2050627706 -0.0265017213 -0.1416738819 0.0884847776 0.0743474452 -0.0158745377 -0.1808110748 -0.0191529815 0.1518595674 -0.0919914775 -0.0858317139 0.0075308158 0.2619707091 0.0433312828 0.0857582224 -0.0626674396 -0.0539992887 -0.0057097360 0.0960617170 0.0173624705 -0.2580399036 -0.1593851329 0.0904387109 0.0206678316 0.0241033687 0.0019497433 0.0079502000 0.1875344563 0.0139626251 0.0035955738 -0.0007326749 -0.0099217603 -0.0021515221 0.0127433849 0.0038790820 0.0071219532 -0.0059317175 -0.0051539378 -0.0047069726 -0.0021893904 0.0002344283 0.0007204825 0.0002505298 -0.0004200851 -0.0003586124 0.0002177429 0.0005733003 -0.0016299493 -0.0018169261 -0.0004840630 0.0006361907 0.0002494806 0.0002562617 0.0004723304 -0.0013136330 -0.0021276384 -0.0012296183 -0.0010514700 0.0010221079 0.0028892976 -0.0010091401 0.0022359058 0.0015863781 0.0002033178 -0.0053613012 -0.0017483866 -0.0029715365 -0.0026641625 0.0247339109 0.0178929666 0.0083292572 -0.0091551989 0.0235423407 -0.0042704867 0.0063054806 -0.0164187663 0.0090387260 -0.0035579491 -0.0028912483 0.0032276999 0.0019050395 -0.0018233775 -0.0039775140 -0.0062909853 0.0021341147 -0.0005840127 -0.0012001620 0.0078628140 0.0108986467 0.0023746525 0.0277503906 0.0084190211 -0.0009228912 0.0123683054 0.0013575387 0.0035554113 -0.0067740362 -0.0064423895 0.0060652833 0.0009833473 0.0048249769 -0.0009649910 0.0012080057 0.0012991347 -0.0039812342 -0.0057949449 -0.0084308710 0.0012118339 0.0020952908 0.0026628501 -0.0011021871 0.0042178716 0.0040520225 -0.0241549061 0.0043016294 -0.0088610237 -0.0124586383 0.0132038480 0.0077814978 0.0051760732 -0.0006533045 0.0016037422 0.0058113149 0.0009465148 0.0062570586 0.0065987926 -0.0033169148 0.0004142094 -0.0068619759 -0.0026870232 0.0037462313 0.0021573106 0.0022344212 0.0044215621 0.0041671773 -0.0009305560 -0.0098266363 -0.0047108164 -0.0017924531 0.0022553616 0.0023399186 0.0034390572 0.0069053741 0.0069000211 0.0049559594 0.0004184188 0.0020517103 0.0029645693 0.0047404452 0.0007841069 -0.0008411705 -0.0013127987 -0.0052980648 -0.0004989661 0.0018504750 -0.0045803360 -0.0047260978 -0.0026582429 -0.0016705188 0.0022449374 0.0026099301 -0.0021861361 -0.0007591514 -0.0030003754 0.0003461883 0.0010659624 0.0016377827 -0.0014457172 -0.0002352425 0.0006459021 0.0067709601 -0.0070218721 0.0019013876 -0.0059928323 -0.0042787748 0.0027881354 0.0095462021 0.0015637820 -0.0021599357 -0.0027661074 -0.0030900873 0.0016260951 -0.0314015692 0.0050133774 0.0028976767 -0.0190446181 0.0270179810 -0.0072121138 -0.0037279764 0.0047838464 -0.0011498406 -0.0014646969 -0.0046205825 0.0019218997 0.0171410646 0.0028072798 -0.0052325469 0.0180333209 0.0238579506 -0.0117467195 0.0004535711 0.0008749866 -0.0000438688 0.0000966847 0.0003175270 -0.0004258884 0.0013477239 -0.0002597410 0.0026382482 -0.0008237685 0.0000357081 -0.0013321467 -0.0072772842 -0.0049354478 -0.0093828297 -0.0011249757 0.0006800911 -0.0024765353 0.0012239098 0.0014761791 0.0007140183 -0.0013159535 -0.0017308780 -0.0006346439 -0.0019397331 0.0004133845 -0.0030270102 0.0012634118 0.0035891864 -0.0010569833 0.0058640428 0.0027336833 -0.0003806051 -0.0396480147 -0.0248291922 0.0214818688 -0.0054772968 -0.0179411677 -0.0120444685 -0.0202370813 -0.0216455931 -0.0125946077 -0.0040966671 -0.0012528530 0.0008819147 0.0210777458 -0.0054782583 -0.0176472972 0.0148048258 -0.0100100424 0.0076404909 0.0338925026 -0.0048773657 -0.0027654714 0.0816375063 0.0261765239 -0.0052634260 -0.1349157329 -0.0635922743 0.0540791852 0.0410922727 -0.0740863402 0.0194474244 -0.0719284598 -0.0684849277 0.0365110279 -0.0275287903 0.0343404672 -0.0147443153 0.0449982506 0.0676761434 0.0078138564 0.0109101098 -0.0277278653 0.0318242101 -0.0455918678 -0.0333371821 -0.0265518928 -0.0241172043 -0.0331655418 -0.0187656566 0.1022930044 0.0057142488 0.1023620363 -0.0088749659 -0.0020904618 -0.0092150919 0.0104106896 -0.0035264302 0.0017318612 -0.0000539546 -0.0012216761 0.0002653407 0.0004527180 -0.0003078981 -0.0003514289 0.0013301088 -0.0004085168 0.0005516417 0.0013970074 0.0004859294 -0.0006021433 -0.0023517062 -0.0020799504 -0.0005972024 -0.0058590914 -0.0060341254 0.0014108051 -0.0050875900 -0.0064726867 0.0007951626 -0.0010422281 0.0108526347 0.0043084185 0.0081057285 -0.0027644641 -0.0060052471 -0.0012408019 0.0062575485 0.0032603700 0.0094596400 -0.0011491479 -0.0055254819 -0.0007999216 -0.0082040271 -0.0030433574 -0.0146462114 0.0064568055 0.0114763269 -0.0015289038 -0.0011650069 0.0000007707 -0.0006139886 0.0022073885 0.0010752818 -0.0012351607 -0.0007025487 0.0005885326 0.0057076932 -0.0062449619 -0.0034228498 0.0065237829 0.0036871678 -0.0024437141 0.0078009300 0.0047753415 -0.0026739086 -0.0071225036 0.0047734826 0.0036932609 0.0000226089 -0.0090609804 -0.0012097210 -0.0060862467 0.0037457054 0.0032346233 -0.0003881178 -0.0076217720 -0.0009304526 0.0106639388 -0.0064495631 -0.0055832313 0.0003076629 0.0149854783 0.0016616463 0.0017665696 -0.0015266957 -0.0017069992 0.0000197987 0.0019783980 0.0003653774 -0.0120758942 -0.0075077694 0.0042932654 -0.0020488397 -0.0007870098 0.0001083035 0.0004434232 -0.0148062636 -0.0044093760 -0.0460774899 0.0222275294 0.1888571080 -0.0004587814 -0.0018508625 -0.0004541457 0.0005627075 -0.0000396161 -0.0002039058 0.0006207976 0.0005658910 0.0001549286 -0.0003388348 -0.0002633560 -0.0003195272 -0.0000263394 -0.0010039921 0.0005128820 -0.0001359950 -0.0014136729 0.0014692839 0.0001721804 -0.0000961457 0.0004626694 -0.0008036831 0.0004885492 0.0006230912 0.0002990283 -0.0004160471 -0.0003473504 0.0039519062 0.0091047133 -0.0061632068 0.0017354411 -0.0027050412 -0.0028239495 -0.0026644302 0.0072470587 0.0053292948 0.0081729319 0.0039545717 -0.0072052258 -0.0043053089 0.0109392807 -0.0049058635 -0.0013984804 0.0021082194 -0.0015431983 0.0023220522 0.0018018509 -0.0002383381 -0.0013577300 0.0033226307 -0.0026262101 -0.0022187745 -0.0021278771 -0.0009920229 -0.0009525289 0.0003137678 0.0002372395 0.0002510420 -0.0006868240 -0.0004833901 -0.0007691784 -0.0001630430 0.0006389874 -0.0723327964 -0.0762503241 -0.1052507976 0.0852743429 0.0062142510 0.0571109668 -0.0458026351 0.0603602847 0.0515823689 -0.0284449102 -0.0838474834 -0.1113504194 0.0862840890 -0.0067845347 0.0263332736 -0.0746183294 0.0997227282 0.0624460178 -0.0596609857 0.0346095451 -0.0167907345 0.0279801809 0.0137252687 0.0002114844 0.0019766434 -0.0006687491 -0.0039557589 0.0613880965 -0.0268706192 0.0352338498 0.1182736785 -0.1343634707 -0.0296507939 0.1414271024 0.0593521305 -0.0637567365 -0.0560655391 -0.0477857709 -0.0810721886 -0.0780961772 0.0131213526 0.1697684315 0.0983998895 0.0346002286 -0.0443849354 -0.0451464416 -0.0615083234 -0.1175888902 -0.1508101834 -0.1062105072 0.0108772666 -0.0437267972 -0.0454262676 -0.0661961901 -0.0054713312 0.0048169756 -0.0005863593 0.0117355687 0.0044040559 -0.0296686790 0.0610586223 0.0608715591 0.0274989039 -0.0107487290 0.0093014440 0.0114782080 0.0101921920 -0.0001858612 0.0040093861 -0.0066410538 -0.0092336104 -0.0104212331 0.0215178780 0.0021917145 -0.0056865132 -0.0584402596 0.0794221151 -0.0250861448 0.0715558914 0.0364609289 -0.0263042834 -0.0864221568 -0.0255539483 0.0239745883 0.0203145284 0.0319480434 -0.0153767566 0.2495247505 -0.0552861199 -0.0169048976 0.1783657284 -0.2640243290 0.0713651256 0.0471504934 -0.0423601978 0.0062356889 0.0055662658 0.0469758532 -0.0177581345 -0.2429987599 -0.0097410502 0.0675370411 -0.1907578020 -0.2368993123 0.1185568073 -0.0211741405 0.0088152554 -0.0401369867 0.0290444694 0.0441443202 0.0055763719 -0.0394458516 -0.0286466904 -0.0437130775 0.0126116575 0.0259121842 0.0004215649 0.1455624885 0.0625953839 0.2053066504 0.0568793755 -0.1249129257 0.1884374008 0.0121129472 -0.0223044170 0.0366991021 0.0128149557 0.0348409065 -0.0081560486 -0.0682677995 -0.0590909111 -0.0561795054 -0.1035589713 -0.2029085847 0.0022562299 0.0004361283 0.0008840852 -0.0000592616 0.0002788883 0.0002668919 0.0004037604 -0.0011921641 -0.0026264597 0.0001465201 -0.0002137590 -0.0000435117 -0.0004880242 0.0011533846 -0.0005591692 0.0000123655 -0.0051655203 0.0083837592 0.0088088990 -0.0018272813 -0.0000088508 -0.0029395563 -0.0093869986 0.0061787069 -0.0063079756 0.1108133320 0.0855644294 -0.0391341828 -0.0769815653 -0.1261262014 0.0543068569 0.0001409554 -0.1153507358 0.0418392831 -0.1081041917 -0.0821081498 0.0604691865 0.0895570392 -0.0113277702 -0.0017283445 0.0678851869 0.0158291913 0.0725450470 -0.0573883988 0.0588382032 -0.1374112237 0.0271813191 0.1070456006 -0.0589792920 0.0601038620 -0.0423261544 0.1314200839 -0.0058792769 0.1003199457 -0.1197182592 -0.0182923611 0.0162163255 -0.0337676934 -0.0302191213 -0.0222407641 0.0083296842 -0.0058237176 0.0001854993 -0.0016070852 0.0092749674 0.0046525810 -0.0051960224 0.0047726320 -0.0031680597 0.0091944707 0.0003711645 -0.0006407242 -0.0056049822 0.0095032393 0.0092214154 -0.0018631887 -0.0032962726 -0.0013773117 0.0015208626 -0.0012543128 -0.0041678034 -0.0011225805 -0.0006551674 -0.0000680362 0.0003786059 0.0024766896 0.0008020038 -0.0012402553 0.0003945590 0.0020203513 0.0005902750 0.0035715947 -0.0022361640 -0.0022896568 -0.0012412163 0.0081018611 0.0028357480 -0.0006263865 0.0023275570 0.0016572068 0.0001345148 0.0014927719 -0.0005132089 -0.0014760034 0.0015669491 0.0019086463 -0.0014002267 0.0012258006 0.0010466554 0.0088779606 -0.0063338978 -0.0092478416 0.0032402981 0.0002479169 -0.0014038084 0.0026111139 0.0015830667 -0.0008918563 -0.0019059045 0.0013616966 0.0009941126 0.0001053957 -0.0028548703 -0.0004029887 -0.0023019409 0.0017812962 0.0012547778 -0.0006600265 -0.0032761196 -0.0001843526 -0.0004308817 0.0004235473 0.0000852616 0.0002138199 0.0061535103 0.0007053647 0.0034264103 -0.0019986616 -0.0020065889 -0.0004594385 0.0044600893 0.0007560737 -0.0023261158 -0.0013877418 0.0008080900 -0.0020891569 0.0020733999 0.0009286596 0.0051685366 -0.0174000238 -0.0142521998 0.0016964381 -0.0165240598 -0.1131653254 0.0006565291 0.0021766863 0.0005991473 0.0033185203 0.0007278115 -0.0008551913 -0.0020282067 -0.0015269887 -0.0003569722 -0.0001179139 0.0001708987 0.0004969330 -0.0028545781 0.0023054468 -0.0022560590 -0.0008173187 0.0020586331 0.0033193521 0.0007559166 -0.0005411172 -0.0003377774 -0.0005117485 -0.0000632452 0.0002030064 0.0001232321 -0.0007083139 -0.0004541939 0.0131357855 -0.0054839086 0.0057131959 0.0032196952 -0.0209559869 0.0111921110 0.0185103946 0.0023562887 0.0084567920 -0.0222178662 -0.0129775848 0.0009327681 0.0061984348 -0.0337507509 -0.0282733462 0.0304050359 0.0154207593 -0.0175104379 0.0004125111 0.0007566247 0.0053347954 -0.0013618929 0.0037312731 -0.0021866364 -0.0061448520 0.0020458793 -0.0006847226 -0.0016197446 0.0031972260 0.0038378700 0.0013765996 0.0055226534 0.0024295657 -0.0021864474 0.0040601608 0.0018544108 -0.0459913034 -0.0230439969 -0.0294223678 0.0307755859 -0.0017702710 0.0135536693 -0.0280389787 0.0331093333 0.0254686596 -0.0030983264 -0.0283264542 -0.0349346636 0.0472108566 -0.0123003791 0.0047866115 -0.0433409226 0.0452775661 0.0210835659 0.0063487360 0.0032311462 0.0001055988 0.0572194096 -0.0391684161 -0.0291792417 -0.0015581321 0.0000275851 -0.0011637764 0.0075781713 -0.0208916857 -0.0055705858 0.0590782143 -0.0876650259 -0.0282742813 -0.1024091664 -0.0501968672 0.0271408058 0.0606317811 0.0421731411 0.0522495260 0.0479547878 -0.0023285161 -0.0856510752 -0.0847325038 -0.0330444867 0.0296533759 0.0366075609 0.0364221272 0.0584058108 0.1241967774 0.0858284833 -0.0379994291 0.0174237213 0.0069939049 -0.0141714316 0.0010182123 -0.0030367598 -0.0016587922 0.0992305562 0.0410092825 -0.0109914323 -0.0114536133 -0.0187502436 -0.0078315013 -0.0032412284 0.0024011421 0.0028137281 0.0030106235 -0.0000534639 0.0011846753 0.0033251409 0.0043595466 0.0048736473 -0.0106319523 -0.0013328002 0.0025077305 -0.0522504271 0.1064230530 -0.0375591512 0.0395596956 0.0507411297 -0.0299134171 -0.1271356585 -0.0067426235 0.0234543410 0.0524835353 0.0038592957 -0.0100869991 0.3059307493 -0.0414671086 -0.0299888411 0.1751839629 -0.2173971516 0.0537295977 -0.0044624635 -0.0624678101 0.0277210498 0.0413548580 0.0558657707 -0.0277467291 0.0266983589 -0.0777889154 0.0141402881 -0.1438978118 -0.2207461042 0.1043808003 0.0139947098 -0.0481386345 0.0625977495 -0.0605186937 -0.1062946419 0.0112229828 0.0147743448 0.0631446086 -0.0292840663 0.0135929380 -0.0468091680 0.0567779789 0.0163596939 0.0771456818 -0.0194235784 -0.0522730020 0.1953422322 -0.2308404605 -0.0763296427 -0.0156446385 -0.1050853952 0.0289647390 0.0011117009 0.0439192106 0.2123223790 0.1002305672 0.2288962282 0.1565882217 0.2574992573 0.0400002354 -0.0011877130 -0.0018337515 0.0000300407 0.0019624451 0.0015352127 -0.0026643810 0.0030825469 0.0067452534 -0.0007997496 0.0039180378 0.0023413304 0.0018376209 -0.0040362165 0.0002016711 0.0009576468 0.0165523469 0.0009176788 -0.0130881236 0.0122893544 -0.0085065971 0.0061847604 0.0150178027 -0.0013495802 -0.0011688949 -0.0005484022 0.0016630157 -0.0005074961 -0.0044000367 -0.0003634964 0.0005913229 0.0007472873 -0.0007923434 0.0001964611 0.0016619489 -0.0020427468 0.0008870076 -0.0010971106 0.0005428653 -0.0004478083 0.0013999077 0.0012727592 0.0002529277 -0.0003441877 0.0004374940 -0.0003671655 -0.0002876760 0.0012416197 -0.0013784918 0.0004497470 -0.0022382046 0.0026225699 -0.0010132689 0.0006315433 -0.0031274403 -0.0011350463 0.0003143339 -0.0002388361 -0.0007912605 -0.0006483565 0.0003400341 0.0030920429 0.0026821600 -0.0050649339 -0.0056609846 -0.0034964694 0.0050122384 0.0007933457 -0.0016705234 0.0049281953 0.0098361083 -0.0158280019 -0.0107596142 0.0029067703 0.0004130366 -0.0023590727 0.0026441377 0.0000811817 -0.0014872760 0.0043790195 0.0050330501 -0.0000827755 0.0008420792 -0.0036563740 -0.0015732945 -0.0058048408 0.0010684321 0.0038955152 0.0003905778 -0.0010437086 -0.0003159960 -0.0003883458 0.0061680989 0.0017490081 0.0003943025 0.0074530725 0.0015233827 0.0146659980 -0.0075131357 -0.0112805485 -0.0023189771 -0.0145729323 -0.0097928365 -0.0057611613 -0.0039937391 0.0017091232 -0.0003165475 0.0093467324 0.0024528221 0.0393901785 -0.0196113380 -0.0242270713 0.0048742426 -0.0036035125 -0.0026380763 0.0002525628 -0.0006302820 -0.0003130707 0.0004861841 0.0006117127 0.0001680038 0.0000453484 -0.0021070497 -0.0001178136 -0.0013380708 0.0027276133 0.0008625021 -0.0011799035 -0.0020671800 0.0000255826 -0.0170425866 0.0116026440 0.0047465977 -0.0003930954 0.0036239480 -0.0005594688 0.0046548342 -0.0008198142 -0.0018003740 -0.0003173200 0.0074380265 0.0030028498 0.0040417735 0.0016576263 -0.0013605744 -0.0013677355 -0.0025840058 0.0000338848 -0.0010579798 -0.0012044613 -0.0041306322 0.0007520255 0.0005404686 -0.0003066802 -0.0354520688 -0.0432751266 -0.0094495513 -0.0685832001 -0.0068290018 0.0238632094 0.0423314049 0.0294718257 0.0045154541 -0.0018487845 -0.0000550904 -0.0004832587 -0.0002199200 0.0002892074 -0.0061838785 -0.0023792318 0.0038321494 -0.0004822586 -0.0040166383 -0.0013112190 0.0018379358 0.0159641450 -0.0071406231 -0.0118445332 -0.0056546548 0.0230819047 0.0164876694 -0.0376108124 -0.0057169060 -0.0109960818 -0.0246277220 -0.0028205918 0.0741524867 0.0541284574 0.0066818502 0.0263937335 -0.0271746946 -0.0125649429 0.0167551772 0.0113289323 -0.0469914085 -0.0046368382 0.0266549618 -0.0028414592 -0.0031813227 0.0170489078 0.0125861788 -0.0225186819 -0.0061495460 0.0044610855 -0.0045701602 0.0195900962 -0.0160761330 0.0004844510 0.0540897945 -0.0723079987 -0.0858626799 -0.0413328861 -0.1304585160 -0.0646106944 0.0697647146 -0.0857278555 -0.0563110749 0.0005504324 -0.0011451506 -0.0005058289 0.0010100749 -0.0000542811 0.0003256861 -0.0005653270 0.0002071430 -0.0000535371 -0.0009914973 -0.0001977270 -0.0005531022 0.0007306321 0.0002485939 0.0005338099 -0.0002572175 0.0004059892 0.0003331462 -0.0022418626 -0.0003725051 -0.0004019294 -0.0007937970 0.0003830415 0.0000841183 0.0022997858 -0.0005066364 -0.0001936175 -0.0018877634 0.0004560457 -0.0006135799 0.0001186954 0.0002147276 0.0000668531 -0.0029794309 -0.0013809297 -0.0002678153 0.0022999548 0.0011894891 0.0018270311 -0.0009475951 -0.0005038670 -0.0009690771 -0.0026094662 -0.0015469548 -0.0006980917 0.0023917754 0.0016165840 0.0013929264 0.0063691482 0.0006849843 -0.0020589409 -0.0011376441 -0.0032016946 -0.0042920156 0.0042453541 0.0019336146 0.0013057850 0.0023841531 0.0003500480 -0.0020440608 -0.0015252602 -0.0019757217 -0.0044060880 -0.0005385269 0.0009017894 0.0012633344 -0.0011424025 -0.0004375768 -0.0011043439 -0.0001354685 -0.0017112859 -0.0028978849 -0.0028649713 0.0001330941 0.0017510036 -0.0004506279 0.0006415152 -0.0001851726 -0.0002421536 0.0002188499 -0.0000806703 0.0005292679 -0.0003711378 0.0000650496 -0.0002288088 0.0002903272 -0.0000758210 -0.0018232395 -0.0002246810 0.0003054293 -0.0000983613 -0.0000162472 -0.0000114353 0.0006445198 0.0000402819 -0.0001443807 -0.0005720053 -0.0003122558 0.0002188531 -0.0009264870 0.0002638351 0.0001808947 0.0001257021 0.0007293753 -0.0003127890 -0.0002642981 -0.0006194515 0.0000453666 -0.0004366698 -0.0001856903 -0.0004200300 -0.0008158644 0.0002874360 -0.0015148659 0.0005279500 0.0000865217 0.0007704685 0.0037201754 0.0024226725 0.0040760841 0.0007134690 -0.0000409660 0.0011739519 -0.0011345234 -0.0009639318 -0.0009327746 0.0007530374 0.0004974834 0.0007522382 0.0036319669 0.0007961612 0.0045718801 0.0009167932 0.0005910702 0.0009358858 0.0832652992 0.0820983215 -0.0100656919 -0.2794647744 -0.1725661089 0.1993132088 -0.1493812550 -0.3758115860 0.0253658413 -0.3189738705 -0.1775785340 -0.1100416685 0.0909521234 -0.0167033799 -0.0209585957 -0.3083063996 -0.0328428877 0.2354620000 -0.2996486302 0.2588615943 -0.0828915377 -0.3366570193 0.0027291486 0.0499355283 0.0067209237 0.0062383223 -0.0028624388 -0.0051224551 -0.0038985692 0.0016267056 -0.0042071796 -0.0031148074 0.0015998791 -0.0050425780 0.0039572697 -0.0018287707 0.0085775085 -0.0066421252 0.0025784022 -0.0064708194 -0.0082416206 -0.0012535753 0.0038404621 0.0062477930 -0.0003730084 0.0033976396 -0.0008791804 0.0050734197 -0.0032859882 0.0044973811 -0.0080041680 0.0008136814 -0.0011006521 0.0050010768 0.0013402758 0.0000316756 0.0010870384 -0.0019660210 -0.0003896769 0.0001104323 -0.0013680507 -0.0015854097 0.0028380970 0.0030629943 0.0020861928 -0.0025262053 -0.0010241274 0.0006497670 -0.0029230173 -0.0624052320 0.0501783917 0.0633180284 0.0021611245 0.0114614775 0.0031316576 -0.0112105690 -0.0007362930 0.0063125318 -0.0161147126 -0.0078963937 0.0078591349 -0.0005473029 0.0040570139 0.0016861134 0.0158277722 -0.0035313934 -0.0109767326 0.0015724197 0.0036016365 0.0010035398 0.0038144253 -0.0134748312 -0.0080985603 -0.0013339654 0.0042721034 0.0023493222 -0.0319051562 0.0167593861 0.0264330800 -0.0043165254 0.0264576868 -0.0012497721 -0.0006191405 0.0022807344 0.0008659687 0.0265881037 -0.0165372742 -0.0112834902 -0.0730033902 0.0619407215 0.0231087804 -0.0098785437 0.0083765590 0.0032920715 -0.0072499705 -0.0056755675 0.0022224568 0.0009882061 -0.0054185786 -0.0001042089 -0.0023882513 0.0124224050 0.0031497835 0.0085098416 -0.0109012025 -0.0050948370 0.0033553278 0.0163312016 0.0010579412 -0.0033430179 -0.0040571862 -0.0101245659 -0.0058394115 -0.0419885082 -0.0100839112 -0.0135223759 0.0025094050 0.0069494087 0.0012954508 -0.0396379889 -0.0065293712 -0.0072691239 -0.0061060950 0.0017302975 0.0042671338 0.0043606529 -0.0000106065 0.0011748890 0.0382335919 0.0093553707 0.0009825553 -0.0001889821 -0.0009658683 -0.0189852338 -0.0074547326 -0.0005706150 0.0389810039 -0.0044257253 -0.0192207158 -0.0092210081 -0.0037576497 0.0010849859 -0.0011009147 0.0000544819 0.0013990103 0.0034384411 0.0059551276 0.0168159066 -0.0041344370 -0.0086367595 -0.0042388915 0.0013143123 0.0023296719 -0.0031595088 -0.0147397730 0.0056900941 0.0103313394 0.0055129845 -0.0185398534 -0.0141819050 0.0643830717 -0.0612058000 0.0785089201 0.0466128036 0.0604412586 -0.1936410952 -0.1472324434 -0.0905797268 -0.1290429119 0.0988568806 0.0675301825 0.0334557958 -0.0354955728 0.1014758541 -0.0086953189 0.0098353318 -0.0496639622 0.0269333196 -0.0247017196 -0.0183922526 0.0139294946 0.0119574630 -0.0228035399 0.0196880011 0.0017422873 0.0199346760 0.0050652230 -0.0517080601 0.0571496336 0.0654304643 0.0348313460 0.1042973268 0.0524587844 -0.0614962634 0.0611077361 0.0494563553 -0.0017126977 0.0002460710 0.0001012422 -0.0003195263 -0.0000562717 -0.0002897256 -0.0005508040 0.0009131943 0.0009303307 0.0013138819 -0.0007282045 -0.0003441562 0.0008885078 -0.0006638597 -0.0003239204 -0.0011201960 0.0008894936 0.0001386153 0.0014401246 -0.0002559540 0.0004225928 0.0038283693 -0.0024826134 -0.0020238276 -0.0034792039 0.0006617718 -0.0001062870 0.0013037732 -0.0011229655 0.0001303414 0.0010358553 -0.0025562739 -0.0007614444 0.0045397269 0.0026130969 0.0012474965 -0.0043289200 -0.0021625724 -0.0017977207 0.0011907827 0.0001430385 -0.0005940472 0.0043695611 0.0024248942 0.0008212338 -0.0034876186 -0.0018677312 -0.0006137065 -0.0110851338 -0.0025660286 0.0049887579 0.0010744497 0.0044415878 0.0078889014 -0.0046123608 -0.0021443858 -0.0010658396 -0.0086973313 -0.0025884002 0.0040676715 0.0004834419 0.0014502398 0.0054985359 0.0006754008 -0.0010902931 -0.0015327200 0.0018576343 0.0006118796 0.0017041774 0.0002721321 0.0018795431 0.0030596314 0.0029976751 0.0000254486 -0.0018348795 -0.0006450128 -0.0034048357 0.0013505804 -0.0018088213 0.0037048919 -0.0011486617 -0.0064267931 0.0030346150 -0.0001228582 0.0036422501 -0.0006189471 -0.0003549885 0.0252981638 0.0007018430 -0.0042307144 0.0061286511 -0.0039309328 0.0004051116 -0.0058787542 -0.0023366291 0.0022062704 0.0042871141 0.0003648836 -0.0009117887 0.0259876253 -0.0067973847 -0.0044157842 0.0042266199 -0.0010163860 -0.0004077032 0.0011701720 0.0031640556 -0.0005468538 -0.0007009671 -0.0052373395 0.0032945992 0.0043053346 0.0001408468 0.0068676059 -0.0025445472 -0.0015055354 -0.0028409545 -0.0175990425 -0.0105967239 -0.0215703753 -0.0042017070 0.0026342985 -0.0091069210 0.0042086583 0.0048631657 0.0024843625 -0.0027602854 -0.0018187607 -0.0027262688 -0.0154331093 -0.0027963380 -0.0209034974 -0.0020757699 0.0001083771 -0.0036563928 0.0743730218 0.0667195626 -0.0175825885 -0.2537871051 -0.1860229390 0.1916789702 -0.1302825980 -0.3611543231 0.1048474247 -0.3701849552 -0.1594784639 -0.0880010700 -0.0654860400 0.0247494027 0.0174813463 0.2590394807 -0.0343379038 -0.2197888612 0.2589386823 -0.2172369517 0.0543812333 0.2708628009 -0.0220999799 0.0055183850 -0.0925481250 -0.0847142825 0.0416455615 0.0575148361 0.0513683372 -0.0171350224 0.0672932439 0.0378410347 -0.0215590690 0.0715974660 -0.0624331467 0.0301261471 -0.1227054139 0.0978592019 -0.0360649290 0.0954309155 0.1170915320 0.0242420671 -0.0606362413 -0.0879368598 -0.0039607155 -0.0451702511 0.0146379378 -0.0706289650 0.0479670749 -0.0590637904 0.1147794306 -0.0158806654 0.0166605805 -0.0754427241 -0.0151924344 0.0006842476 -0.0192477965 0.0306845511 0.0089419481 -0.0042650016 -0.0004819202 0.0007882393 0.0010052310 -0.0003107114 -0.0013361829 -0.0010444455 0.0007458914 -0.0014120444 -0.0011361943 0.0072457365 -0.0039467546 -0.0065161221 -0.0062999508 -0.0034348067 0.0015171977 0.0037254158 0.0041364044 -0.0006839755 -0.0007957430 0.0032680807 0.0018858690 -0.0007275025 -0.0045306255 -0.0009160557 -0.0020783786 0.0009128532 0.0015561356 0.0004896947 -0.0049553395 -0.0021796760 -0.0024722177 0.0019767626 0.0007212892 -0.0015957536 0.0001593457 0.0000227970 -0.0026256102 0.0011500772 0.0027076798 -0.0003217966 0.0106591060 0.0030979980 0.0004636318 0.0003953267 -0.0001370386 0.0016022804 -0.0030702493 -0.0006834606 -0.0129511028 0.0077434255 0.0080872723 -0.0014488983 0.0008668764 0.0004071515 -0.0006004024 -0.0006312589 0.0001382910 0.0002089347 -0.0003909669 -0.0000375819 -0.0002345970 0.0012696591 0.0005286823 0.0006510493 -0.0009515865 -0.0004406932 0.0004812631 0.0015484218 0.0000124130 0.0010383518 -0.0010716081 -0.0013372791 -0.0020072753 -0.0039269813 -0.0036553464 -0.0011165901 0.0001371730 0.0006450433 0.0003843780 -0.0042292148 -0.0005088639 -0.0001106955 -0.0004224916 0.0000250012 0.0015707563 -0.0026467887 -0.0005171176 0.0010768125 0.0446268243 0.0060420040 -0.0210582873 -0.0037431022 0.0020011326 0.0037906096 -0.0051509925 -0.0044889323 -0.0069865546 -0.0015462159 0.0017444926 0.0039899309 0.0029704133 0.0004758961 -0.0000999588 -0.0004523795 0.0001489618 0.0026736440 0.0045757083 0.0065554644 -0.0036360592 -0.0110297227 -0.0057876783 -0.0027535196 0.0018609891 -0.0015438606 0.0004048114 0.0010172297 0.0004923037 -0.0005049791 0.0022503977 0.0015775288 0.0072472644 -0.0449685362 0.0437085884 0.0134043603 0.0369711139 -0.0723916826 -0.0583239132 -0.0551261033 -0.0674162959 0.1170737202 0.0765148995 0.0198090729 -0.0418028205 0.1327467632 0.0188358455 -0.0236436518 -0.0564796930 0.0398199126 -0.0060025634 -0.0052012664 -0.0142636721 0.0054837082 -0.0177357521 0.0253622347 0.0314136794 0.0015491343 0.0061441757 0.0052424890 -0.0102025476 -0.0123834927 -0.0052066346 -0.0181487452 -0.0088856316 0.0080666855 -0.0136946665 -0.0066152717 0.0145795876 -0.0076976740 -0.0092869455 -0.0167840328 0.0115612011 0.0065447684 0.0282912252 -0.0200721899 -0.0094951350 -0.0077806723 -0.0004456625 -0.0038443454 -0.0328491816 0.0164641116 0.0049064377 0.0356457344 -0.0217433104 -0.0024967065 0.0083076833 0.0140767061 0.0168817961 -0.0558148663 0.0579264021 0.0451421836 0.0004675056 -0.0002771144 -0.0010384386 0.0230955181 0.0190080674 0.0292155011 -0.0437282222 0.0756822510 0.0415712661 -0.0422551188 -0.0269121946 -0.0105613315 0.0424046729 0.0230583690 0.0116109676 0.0047127644 0.0051205540 0.0084291420 -0.0437810151 -0.0219333847 -0.0004569790 0.0275175058 0.0129782955 0.0007091647 0.0887062308 0.0441382366 -0.0498482724 -0.0026638550 -0.0180019452 -0.0612622462 -0.0032813187 -0.0001035870 -0.0014259631 0.1090987038 0.0403505125 -0.0380630485 0.0042299372 -0.0052900698 -0.0359301596 -0.0001592357 0.0005814114 0.0009165338 0.0020137728 0.0006354036 0.0018428719 -0.0000474264 -0.0008734335 -0.0010970735 0.0022822547 -0.0002647223 -0.0014855464 0.0061751978 0.0594491300 -0.0233939866 0.0253911285 -0.0543948473 0.0166969598 0.0840252824 -0.0454192141 0.0037932280 -0.0501093778 0.0103701483 0.0041825083 -0.3473221636 -0.0140891467 0.0600680753 -0.0749729935 0.0376826150 -0.0007287217 0.0843967533 0.0301773442 -0.0303735945 -0.0580237340 -0.0016465241 0.0111749250 -0.3832890073 0.0950579107 0.0673048470 -0.0691896719 0.0003039297 0.0123876307 -0.0176821851 -0.0502380260 0.0102190610 0.0103651529 0.0728502225 -0.0445280908 -0.0571672006 0.0028490540 -0.0954312059 0.0369759713 0.0181111557 0.0441567979 0.2402358914 0.1510471518 0.2937597773 0.0546350192 -0.0185996266 0.1055992094 -0.0626378515 -0.0671800287 -0.0409241187 0.0372670826 0.0217636054 0.0394159944 0.2309385028 0.0470410732 0.3046870517 0.0433940528 0.0246846556 0.0504237471 0.0065214111 0.0091330205 -0.0002135584 -0.0246932081 -0.0245008614 0.0267174804 -0.0177876909 -0.0391399435 0.0031228865 -0.0321339218 -0.0272925764 -0.0182121813 -0.0169887634 0.0063992724 0.0043974601 0.0536613997 -0.0079274511 -0.0478155070 0.0538424124 -0.0485191576 0.0103455900 0.0620374008 -0.0048483293 0.0017489160 0.0102565263 0.0290738048 -0.0120141443 -0.0713099256 -0.0006409114 0.0071388107 -0.0048965989 -0.0051713819 0.0023274379 -0.0011944527 0.0003684267 -0.0009922770 0.0036940617 -0.0224329683 0.0088856203 -0.0060698324 -0.0033614771 -0.0059162005 0.0033530816 0.0079223311 0.0009786828 0.0029955273 0.0009405549 0.0030728602 -0.0036243232 -0.0031364845 -0.0017396859 -0.0097521988 -0.0039778149 -0.0092665606 0.0007873796 0.0000925127 0.0022576894 -0.0007237031 0.0009993098 0.0002159491 0.0024721990 0.0006099104 -0.0024406409 -0.0029320966 -0.0010094978 0.0028430221 -0.0002825066 -0.0004034976 0.0018664209 -0.0079190777 0.0012952065 0.0056964253 0.0025624801 0.0025619723 -0.0005049637 0.0009851985 0.0012529051 -0.0001736821 0.0019447876 0.0001146620 -0.0016652462 0.0000509462 -0.0031307550 -0.0010728377 -0.0021088236 0.0018031769 0.0019337856 0.0004713186 -0.0023774176 -0.0012465437 -0.0008648074 0.0005642299 0.0010404389 -0.0003976414 0.0066645393 0.0021148751 0.0033358334 -0.0002831083 -0.0020470251 0.0006858739 0.0022602264 0.0012382370 -0.0017359014 -0.0023161417 0.0018098165 -0.0035066836 0.0083895127 -0.0010286644 0.0287102452 -0.0172169279 0.0031233698 0.0007939459 -0.0017330098 0.0000424416 0.0004146583 0.0006956470 -0.0001504274 0.0025725635 0.0000678604 -0.0015812428 -0.0002539061 -0.0035510051 0.0004285097 -0.0000151792 0.0022673815 0.0000453589 -0.0010840646 -0.0025528706 -0.0001129405 -0.0018335661 0.0033928433 0.0088551608 -0.0046267920 0.0063302789 -0.0078083199 -0.0025204085 0.0043819323 0.0021267576 -0.0002521836 0.0093778437 0.0031844547 0.0030985004 0.0024651784 -0.0008889774 -0.0000031087 0.0006418072 0.0002823457 -0.0014971183 -0.0066718493 -0.0038181396 0.0009980994 0.0015352868 0.0019131099 0.0400161737 -0.0413037602 -0.0352168521 -0.1069472515 -0.0044423612 0.0410241185 0.0496945813 0.0313483258 0.0018499963 -0.0019297878 0.0003607584 0.0018708493 0.0058532358 0.0117863155 0.0264609014 -0.0125884586 -0.0254615933 -0.0144175617 -0.0176501173 0.0046630194 -0.0038216993 0.0216296162 -0.0004132165 -0.0099523094 -0.0118969344 0.0457553634 0.0330537714 0.0825153824 -0.1292358560 0.1429655522 0.0592847213 0.1267200419 -0.2998027505 -0.2319649493 -0.1748231141 -0.2273562055 0.2725525770 0.1842312106 0.0737848985 -0.0971261246 0.2886720088 0.0298268722 -0.0155103116 -0.1420701166 0.0883275350 0.0153683317 0.0057977226 -0.1103802933 0.0046413458 -0.0525722786 0.1148853118 0.1803127020 -0.0254978501 0.0274688327 0.1225598178 -0.1647826486 -0.1943677032 -0.0933146985 -0.3071026816 -0.1493069791 0.1550515844 -0.1955564579 -0.1255896421 0.0004966259 -0.0021161956 0.0030152242 0.0040457238 -0.0014706439 -0.0003658062 -0.0044280689 0.0018437867 0.0001344893 -0.0004908379 0.0003697194 0.0006459145 0.0052255689 -0.0010193544 0.0010939331 -0.0024253301 0.0004287843 -0.0015805892 -0.0093126076 -0.0019431922 -0.0051459561 0.0028527348 -0.0039270110 -0.0053467053 -0.0002915228 -0.0008468879 -0.0011437305 -0.0128302096 -0.0015204507 -0.0052752554 -0.0033991395 -0.0023139453 -0.0002327643 0.0006915594 0.0000406368 -0.0011442249 0.0007001474 0.0006285879 0.0010980935 -0.0013481971 -0.0003040635 0.0010426119 -0.0005091162 -0.0006656580 -0.0014402535 0.0015016657 0.0007678772 0.0003084321 -0.0044179634 -0.0008999131 -0.0003179459 -0.0038280909 -0.0023029538 -0.0050026468 0.0007366387 0.0001739257 -0.0002050352 0.0001650618 -0.0008409593 -0.0017455938 -0.0020953365 -0.0018692089 -0.0048605065 -0.0000702190 0.0003357861 0.0002947121 0.0003777171 0.0001028225 0.0004208500 -0.0000694988 -0.0001246857 -0.0002106754 -0.0002497268 0.0000290749 0.0001680435 -0.0058245744 -0.0281753188 0.0121910503 -0.0086443747 0.0273908434 -0.0098999206 0.0021208558 0.0032035144 -0.0014113571 -0.0027271471 0.0126968573 -0.0043749424 0.0566768539 -0.0020463696 -0.0093868580 0.0157569514 -0.0204624893 0.0049554692 0.0040369256 -0.0047465428 0.0014217581 -0.0020970258 -0.0104861397 0.0042218077 0.0489565192 -0.0108073085 -0.0077392499 0.0112719243 0.0068674138 -0.0043118886 -0.0009519364 -0.0015372233 -0.0001949512 -0.0005120195 -0.0011000507 0.0001322938 0.0038181228 0.0011862402 0.0055255736 -0.0017497338 -0.0000241801 -0.0027046165 -0.0091176882 -0.0050435774 -0.0117396018 -0.0026536593 0.0025013039 -0.0065055159 0.0030796776 0.0034342065 0.0019484825 -0.0027494093 -0.0033859823 -0.0014985351 -0.0056719546 0.0001985244 -0.0086481836 0.0012882818 0.0049689579 -0.0023468469 -0.0290840914 -0.0000704486 0.0196976061 0.0833054358 0.0170919745 -0.0018173920 0.0083156803 0.1046686684 -0.1168697273 0.1804800721 -0.0417744511 -0.0517350816 -0.0288403586 0.0124529043 0.0060315432 0.0485817609 -0.0019047979 -0.0502445822 0.0538161121 -0.0389183768 0.0317615003 0.0272369778 -0.0060793255 0.0185347023 0.0163340201 0.1578488278 -0.0644974525 -0.5252171574 0.0713104652 0.0291277792 -0.0264693320 0.0258281501 -0.0074967380 -0.0073754119 -0.0050329773 0.0015571201 -0.0368898635 -0.1448885509 0.0587635305 0.0190069166 0.0396674763 -0.0099956799 -0.0253222268 -0.0349951462 0.0179672081 -0.0134229626 0.0061374676 -0.0220928016 0.0181889566 -0.0197612980 0.0389258890 0.0011552384 0.0080927630 -0.0200652042 0.0007278335 -0.0029099983 0.0004972359 0.0306521364 0.0196853340 -0.0067724296 0.0021380550 0.0019639116 0.0011187422 -0.0027681911 -0.0025983872 0.0012514282 -0.0007231355 0.0008227114 -0.0037681529 -0.0026829956 0.0035101678 0.0086680599 0.0033412482 0.0018074128 -0.0016597823 -0.0032780777 -0.0038434147 0.0006651365 -0.0005024219 -0.0022175030 -0.0003447988 0.0005841354 0.0057959493 0.0013277795 0.0027275681 -0.0022281032 -0.0024314695 -0.0007161029 0.0057959360 0.0026177831 0.0019680578 -0.0028523369 -0.0009474415 0.0023269487 -0.0056245470 -0.0007301442 -0.0001231094 -0.0012562855 -0.0004594859 -0.0002415152 -0.0114592718 -0.0039918462 0.0008466984 0.0002098304 -0.0015739388 0.0010380852 -0.0020459429 0.0010290224 -0.0055975641 0.0037884647 -0.0066709512 -0.0006143903 0.0007894884 0.0002470386 -0.0018952694 -0.0007761812 0.0007101285 0.0008739396 -0.0003778656 -0.0003021413 0.0000238017 0.0010216697 -0.0000952226 0.0002654018 -0.0000773468 -0.0000704040 0.0003138294 0.0003264564 0.0000135416 -0.0034954191 0.0023596019 -0.0011509910 0.0006579062 -0.0094835350 -0.0002450790 0.0022613488 -0.0013606761 -0.0008154708 0.0003552408 0.0041084136 -0.0002213502 0.0038753406 0.0028512079 -0.0012778672 -0.0004855210 0.0023037719 0.0000998778 -0.0023829611 -0.0338360136 -0.0014186254 -0.0097170173 -0.0003940506 0.0053593839 -0.0171379728 0.0204085247 0.0170937021 0.0488065319 0.0023719746 -0.0185404846 -0.0236410695 -0.0147959076 -0.0005889066 0.0009335287 -0.0012256760 -0.0017693383 0.0000798238 -0.0028592437 -0.0099580868 0.0021309337 -0.0018287935 -0.0021062553 0.0076995730 0.0002802699 0.0003410608 -0.0093821651 -0.0000912032 0.0041676270 0.0058622737 -0.0219495875 -0.0158382765 -0.0544119606 0.0346274654 -0.0473123427 -0.0273712739 -0.0369750618 0.1221639150 0.0884133029 0.0522769246 0.0739431153 0.0242530538 0.0127056056 -0.0097387461 -0.0079404990 0.0416844805 0.0218543695 -0.0366185296 -0.0130524877 0.0187062762 -0.0245413450 -0.0163665791 0.0514069058 0.0085278757 0.0021489540 -0.0385671740 -0.0733813901 0.0206710783 -0.0085764443 -0.0610327142 0.0784262949 0.0920849333 0.0452728390 0.1495131861 0.0721457796 -0.0753802567 0.0920437740 0.0611294350 0.0228525781 -0.0134354261 0.0241449153 0.0492757421 -0.0171829811 0.0004144011 -0.0431457499 0.0135492080 -0.0060469048 -0.0078181417 0.0077201691 0.0068491020 0.0439298594 -0.0072925214 0.0100691700 -0.0249932108 0.0061263068 -0.0103272098 -0.1342336611 -0.0183407135 -0.0688335881 0.0009683650 -0.0339723107 -0.0389588132 0.0004454637 -0.0004751205 0.0007953912 -0.1029969042 -0.0062857818 -0.0474622279 -0.0098277883 -0.0295063286 -0.0157287717 -0.0195158347 -0.0128022488 -0.0069752527 0.0209092769 0.0113146138 0.0056512286 -0.0001759996 0.0022508340 0.0068356030 -0.0206889620 -0.0110108570 -0.0021911229 0.0150711872 0.0070300396 0.0000215176 0.0417290979 0.0191179884 -0.0253383632 -0.0041550602 -0.0118368053 -0.0346335615 -0.0001172753 0.0009521158 -0.0001913802 0.0511927969 0.0186477253 -0.0204797602 0.0002306317 -0.0031534235 -0.0229573266 0.0012608939 -0.0019537079 -0.0028370255 -0.0003946920 -0.0002503327 -0.0006347657 -0.0002033372 -0.0012097102 -0.0016977976 0.0005279152 -0.0001468080 -0.0002108227 -0.0328325444 -0.2941252817 0.1244910439 -0.0487540607 0.2588516588 -0.0997447200 0.1367294996 -0.0089336148 -0.0169040474 -0.0967237153 0.1480864214 -0.0403785610 0.2200858691 -0.0292167222 -0.0381611487 0.0572045987 -0.1486819437 0.0454305850 0.1445923010 -0.0158490394 -0.0198119578 -0.0909383382 -0.1162662496 0.0591336444 0.1127241214 -0.0089808590 -0.0134614153 0.0345461739 0.0665333231 -0.0281326654 -0.0035166999 -0.0047387527 -0.0047816260 0.0035638041 0.0165512238 -0.0073795810 -0.0308969452 -0.0026573098 -0.0459610815 0.0189359152 0.0017455877 0.0285598971 0.0999179218 0.0655754536 0.1252465603 0.0210374781 0.0024941068 0.0362047997 -0.0328627680 -0.0295727029 -0.0257918292 0.0190957414 0.0157264925 0.0164931677 0.0947420272 0.0192948528 0.1229142709 0.0216828150 0.0161660805 0.0210472232 0.0093677538 -0.0040889131 -0.0085072343 -0.0242669981 0.0042198247 -0.0117134538 0.0030023193 -0.0306663731 0.0519001241 -0.0660434143 0.0311850425 0.0315035620 0.0184768004 -0.0072251058 -0.0038037625 -0.0470781858 -0.0011144768 0.0414375962 -0.0496096983 0.0327262569 -0.0264206381 -0.0255010014 0.0052202918 -0.0107370072 -0.0305969576 -0.0251275495 0.0132819095 -0.0061115886 0.0231673323 -0.0036193602 0.0182710337 0.0159597956 -0.0081127716 0.0150590265 -0.0239169492 0.0257548846 -0.0228709633 0.0320594110 -0.0134906821 0.0005469902 -0.1085091176 0.0979058546 -0.0072140359 -0.0186370855 0.0079354060 0.0247138383 0.0333612657 0.0033432511 0.0355785615 0.1309421388 -0.0770091452 0.3439496653 0.1684289502 0.3407711190 -0.0176032725 0.0118342775 -0.0314593263 0.0048016758 -0.0004103655 -0.0009949970 -0.0048633947 -0.0000265037 0.0016466274 0.0062460698 0.0022388144 -0.0050926453 0.0021591646 -0.0019232775 0.0012971944 0.0274005418 -0.0196665547 -0.0304764960 -0.0056148495 -0.0059987892 0.0016155672 0.0053781276 0.0037422870 -0.0020403246 0.0034948593 0.0046914697 -0.0009269085 -0.0007744247 -0.0060439926 -0.0013507588 -0.0058195407 0.0028566405 0.0045006159 0.0004872101 -0.0070185151 -0.0028271631 -0.0019186412 0.0064773351 0.0024011648 -0.0023279338 0.0045305213 0.0003023183 0.0068406844 -0.0023788498 -0.0044971290 -0.0005089656 0.0051765163 0.0007576680 -0.0001617669 0.0013523410 0.0013701240 -0.0046983913 0.0006955089 0.0025290017 0.0004909070 -0.0042789385 0.0052445785 0.0011366178 -0.0016560932 -0.0009358614 0.0019537776 0.0009078682 -0.0006894312 -0.0009529014 0.0010839014 0.0005861791 0.0005926652 -0.0017512259 -0.0004239592 -0.0014073929 0.0013691568 0.0007927546 -0.0002568851 -0.0020358654 -0.0002643382 0.0025771250 -0.0011193515 0.0001967607 0.0006595038 0.0112926318 0.0018978164 0.0008057964 -0.0000049979 -0.0007726814 0.0000086781 0.0008892556 0.0007183823 -0.0009590627 -0.0009032539 0.0002845327 -0.0006116294 -0.0042153368 -0.0002305486 0.0033048168 0.0329435539 -0.0017174245 -0.0045938235 -0.0261505730 -0.0368345686 0.0136637682 -0.0200415793 -0.0153163559 -0.0371634320 -0.0023498556 0.0133141491 0.0193219260 0.0126298205 0.0010004066 -0.0003825326 -0.0010621254 -0.0012765747 -0.0089781704 -0.0105018826 -0.0120616952 0.0051549305 -0.0014443353 0.0011898894 -0.0021204467 -0.0001209407 0.0007975203 0.0057128167 0.0012283373 -0.0018180154 -0.0042669279 0.0170200795 0.0120310403 0.0104293639 0.1108376516 -0.0951519543 -0.0180336023 -0.0880226004 0.1263585533 0.1133852700 0.1243664187 0.1466209679 -0.0193313792 -0.0225972429 -0.0539010857 0.0054251761 0.0137293645 0.0489008831 -0.0733068990 0.0302931486 -0.0029520717 0.0066890593 0.0038711834 -0.0158189573 -0.0015171574 -0.0013053926 0.0033025534 0.0156502871 -0.0089497484 0.0011673151 0.0467813295 -0.0633005180 -0.0749758702 -0.0349108131 -0.1201144101 -0.0559836005 0.0572204922 -0.0745370891 -0.0461542384 0.0038378680 -0.0051794493 -0.0077253672 -0.0087984269 0.0067787849 0.0041622990 0.0143188840 -0.0085989981 -0.0032230720 -0.0044399518 -0.0022420820 -0.0045700258 -0.0155827477 0.0081661691 0.0024667912 0.0169240371 -0.0085027443 0.0003765905 0.0096691563 0.0088761655 0.0107040495 -0.0254396126 0.0281066281 0.0232057967 0.0023033090 -0.0004299845 -0.0004006845 0.0158483623 0.0090431116 0.0161775354 -0.0180386472 0.0336138302 0.0206172240 0.0244681635 0.0228472214 0.0311228500 -0.0506284770 -0.0335851892 -0.0366456839 0.0232093530 0.0040169840 -0.0186762879 0.0527993176 0.0365500620 0.0333175967 -0.0643892173 -0.0365778771 -0.0245363574 -0.0350721103 -0.0088910103 0.0532545093 0.0797554527 0.0795225697 0.1553619807 -0.0013876470 -0.0038408161 -0.0002390487 -0.0681662492 -0.0113982834 0.0703247869 0.0647661878 0.0625633384 0.1616082632 -0.0007381070 0.0011112415 0.0016509648 0.0000103308 -0.0000778054 -0.0000989538 0.0003268958 0.0024667300 0.0033060351 -0.0047566866 0.0001752445 0.0021218841 -0.0040160643 -0.0031197782 0.0023756425 0.0125806715 0.0038813417 -0.0053403268 0.0512184906 -0.0189403099 -0.0007669148 -0.0284894463 0.0173357845 -0.0019680082 -0.1292489080 -0.0069022704 0.0212111805 -0.0310132930 0.0131535537 -0.0000494359 0.0499012648 0.0111026197 -0.0137405839 -0.0360474431 -0.0132945330 0.0115880445 -0.1644640804 0.0445394166 0.0331550704 -0.0219702599 0.0151693423 -0.0010865399 0.0758307194 0.2312033449 -0.0799734007 -0.0452813880 -0.2543835094 0.1576166027 -0.0864136572 -0.0348685756 -0.1140234831 0.0376479863 -0.0882924631 0.1270343550 -0.0453136243 -0.0057243978 -0.0500561937 -0.0102013763 0.0713471773 -0.0578407641 -0.0932494322 -0.0368296477 -0.1109394280 0.0842665655 0.1452854394 0.0150951830 -0.0813765740 -0.0499034968 -0.1140613066 -0.0329729595 -0.0985445359 0.0264336259 0.0001432027 0.0126272781 0.0052199136 -0.0042552444 -0.0333723904 0.0392838800 -0.0171938998 -0.0134529802 -0.0301671277 0.0129240566 -0.0533368683 -0.0439627124 -0.0310352566 0.0112883416 0.0088117371 0.0917867374 0.0046481235 -0.0746331603 0.1053548429 -0.0930082203 0.0208023712 0.0824853529 0.0069224510 -0.0110352477 -0.0029461487 -0.0056217191 0.0025146588 0.0109454874 -0.0007698274 -0.0006648463 0.0033184693 -0.0003283270 -0.0002099767 0.0024503842 -0.0033218974 0.0030914950 -0.0011423506 0.0069297631 -0.0029336727 -0.0026564283 -0.0162959545 0.0106315419 0.0024076077 0.0020011194 0.0014885692 0.0047885951 0.0047489405 0.0021233656 0.0026612735 0.0154048213 -0.0114830284 0.0391962227 0.0195310351 0.0391319328 -0.0024730323 0.0016583285 -0.0033758491 -0.0011912379 -0.0011863385 0.0002464156 0.0013210423 0.0019931239 -0.0029005326 -0.0027617087 -0.0027314468 0.0032743999 0.0003501483 -0.0008168902 0.0028297513 -0.0375277390 0.0286361969 0.0363152410 0.0121446596 0.0121192295 -0.0025688174 -0.0090715353 -0.0057524594 0.0034685461 -0.0065053154 -0.0079633084 0.0021100482 0.0017902476 0.0066635234 0.0009058977 0.0081597326 -0.0029547308 -0.0060336572 0.0004646918 0.0102944756 0.0033210984 0.0022625391 -0.0085878206 -0.0030103724 0.0029509421 -0.0001664942 -0.0000897721 -0.0050191747 0.0026915224 0.0034239221 0.0027457311 -0.0044553100 0.0005729034 0.0010240356 -0.0015164213 -0.0025121742 0.0065574298 -0.0026614255 -0.0034995017 -0.0063314082 0.0083202419 -0.0050845859 -0.0026530457 0.0024894466 0.0017641506 -0.0031617680 -0.0016593675 0.0010135369 0.0022572697 -0.0014958049 -0.0012968401 -0.0010500424 0.0028566881 0.0011891980 0.0018360808 -0.0016279472 -0.0011174019 0.0004688444 0.0027990149 0.0003393549 -0.0029815217 0.0017862034 -0.0005005101 -0.0040175042 -0.0183060640 -0.0093388476 0.0008426651 -0.0009577404 0.0007008002 0.0002272261 0.0006121526 -0.0007366398 0.0039362246 0.0027158298 -0.0011273648 0.0000466457 0.0065378255 0.0003696948 0.0008347543 -0.0459595504 0.0016502158 -0.0002189441 -0.0023716001 -0.0021940690 -0.0226882015 0.0362233140 0.0266928836 0.0566814687 0.0014424519 -0.0212408712 -0.0307109904 -0.0197448034 -0.0014747797 -0.0003477283 0.0011751928 0.0022697803 0.0149451012 0.0220766985 0.0224846529 -0.0271079237 -0.0064373241 -0.0087188520 0.0099774095 0.0024691784 -0.0041660863 -0.0073567711 -0.0027979568 0.0013935671 0.0065841075 -0.0265148250 -0.0185479282 -0.0025424941 -0.2135407733 0.1866029221 0.0409341563 0.1528246317 -0.2447602567 -0.2122337641 -0.2361424035 -0.2774084653 0.2110727989 0.1782863722 0.2223688990 -0.0702882319 0.0913070881 -0.1749802287 0.2713959736 -0.1766987025 0.0505590566 -0.0595930853 -0.0411572447 0.0795260023 0.0244612982 -0.0271845551 -0.0239808858 -0.0846498851 0.0495865658 -0.0040357091 -0.0763364207 0.0995851565 0.1174219426 0.0561271302 0.1955539911 0.0914327979 -0.0919839971 0.1171151765 0.0747526492 -0.0009839391 0.0005135367 -0.0006104447 -0.0028231791 0.0010225221 0.0001800528 0.0024765716 -0.0011539593 0.0003674669 0.0011627984 -0.0005029195 -0.0001888978 -0.0027003763 0.0008481281 -0.0000583142 0.0026340632 -0.0019974317 -0.0005155470 0.0083730261 0.0014135794 0.0039737110 -0.0004477749 0.0035164566 0.0018814320 -0.0048540556 0.0003191014 -0.0012275531 0.0026836750 0.0004474470 0.0027894447 -0.0041907713 0.0062292456 0.0030377648 0.0016326487 0.0019111369 0.0028178608 -0.0041883199 -0.0031016533 -0.0033706503 0.0010978146 0.0001779467 -0.0013822457 0.0051421074 0.0033088967 0.0026984644 -0.0057708139 -0.0033248672 -0.0028517193 -0.0036084293 0.0009901621 0.0043863813 0.0085119623 0.0070849879 0.0146710107 0.0028109584 0.0007967903 0.0002874559 -0.0064053758 -0.0009586794 0.0059827441 0.0059285639 0.0051126499 0.0137672113 0.0007791865 -0.0009647558 -0.0015096585 0.0028982994 0.0009626616 0.0027673808 -0.0001897092 -0.0007291684 -0.0012503578 -0.0023629552 -0.0000193645 0.0014374542 0.0000749924 0.0095365226 -0.0038307601 0.0022899987 -0.0075893305 0.0026091078 -0.0003150559 -0.0015006373 0.0005946645 0.0007250068 -0.0027423513 0.0009139595 -0.0163588749 -0.0000299320 0.0028916370 -0.0032771975 0.0042863362 -0.0010750138 -0.0001356440 0.0012062080 -0.0004643599 -0.0002164561 0.0023742523 -0.0008083062 -0.0182679586 0.0040536076 0.0036446907 -0.0028705598 -0.0008839552 0.0008313742 0.0093866968 0.0296369525 -0.0106153915 -0.0066117780 -0.0336903767 0.0199135255 -0.0090212125 -0.0044280818 -0.0114044764 0.0035269076 -0.0108183910 0.0138562202 -0.0116055759 -0.0046472730 -0.0133006190 -0.0021499094 0.0076675267 -0.0080006164 -0.0095640088 -0.0027398716 -0.0121811154 0.0094435391 0.0171717369 0.0010444221 -0.0162154224 -0.0076019862 -0.0222610178 -0.0052892067 -0.0133991701 0.0021304095 -0.0046173760 -0.0261934151 -0.0077514177 0.0209301562 0.0721663299 -0.0818993333 0.0368387901 0.0438201960 0.0443377486 0.0006249088 0.1044560737 0.0835956579 0.0626782981 -0.0239263103 -0.0171958956 -0.1872761991 0.0063862095 0.1588910901 -0.2138570984 0.1891044768 -0.0392221223 -0.1862989523 -0.0028443539 0.0109576335 -0.0028299959 -0.0049068816 0.0005806965 0.0062987506 0.0028183161 -0.0026731872 0.0001358762 0.0032937933 -0.0010360368 0.0009649523 0.0009057048 -0.0004220672 -0.0031797266 0.0013586263 -0.0001500885 0.0029059791 0.0047027927 0.0004066251 -0.0026052968 -0.0043277358 -0.0000855066 -0.0023733371 -0.0009391389 -0.0023156312 0.0014120797 -0.0017898983 0.0037123101 -0.0026414821 -0.0013934496 -0.0035230767 0.0004741813 -0.0002426927 -0.0009381030 0.0020910657 0.0009293880 -0.0007699275 -0.0043635492 -0.0033712241 0.0089413499 0.0079180700 0.0032910153 -0.0067073055 -0.0035058825 0.0040225031 -0.0102788516 -0.3794719665 0.2673614684 0.4064607532 0.0430031583 0.0747096767 0.0021947450 -0.0551611514 -0.0122832171 0.0287079014 -0.0557826047 -0.0469176425 0.0213450761 0.0034289059 0.0206544396 0.0038237144 0.0672851282 -0.0147644134 -0.0463474489 0.0040287232 0.0314590945 0.0096399907 0.0115251491 -0.0676882908 -0.0278207985 0.0037555115 0.0281625121 0.0130440719 -0.1105380717 0.0617194855 0.0875116289 0.0015964029 0.0833939207 0.0232514714 -0.0094340166 -0.0114055643 0.0030547831 0.0858121053 -0.0125499452 -0.0583143004 -0.0568867110 0.1039873351 0.0460530345 -0.0192595982 0.0278509095 0.0126866210 -0.0152544591 -0.0106259648 0.0048230587 0.0022833857 -0.0171472923 -0.0032905685 -0.0099435844 0.0242162740 0.0083739548 0.0253665726 -0.0306052516 -0.0152281280 0.0056994905 0.0444192461 0.0040427257 0.0013898326 -0.0185282548 -0.0022521049 -0.0157386079 -0.1145787097 -0.0207612268 -0.0642279977 0.0255244706 0.0325863782 -0.0004656968 -0.1065713685 -0.0152516688 -0.0396030618 -0.0269226724 0.0127211862 0.0125496794 0.0364096324 0.0017822084 0.0029650344 -0.0643569869 0.0321337881 -0.0003244692 -0.0001404817 -0.0008204301 0.0132985034 -0.0091040422 -0.0082568788 -0.0434778498 -0.0071957696 0.0142105649 0.0199039103 0.0126718603 0.0005993530 -0.0017055308 0.0002770843 -0.0002298427 -0.0026360640 -0.0081954493 -0.0134051691 -0.0256597514 0.0173793744 0.0016149855 0.0159203117 -0.0073903088 0.0065314650 0.0094805956 -0.0004024050 -0.0053987139 -0.0065310131 0.0199474502 0.0139212555 -0.0438865009 0.0711972865 -0.0770401636 -0.0342002536 -0.0505893524 0.1436672244 0.1060412772 0.0926035408 0.1142378957 -0.0044403089 0.0459478829 0.2083041726 0.0105084695 -0.1826731705 -0.2142256981 0.3502453647 -0.0902589948 -0.0195978447 0.0021158171 0.0102639704 0.1087360786 -0.0128819506 0.0688084042 -0.1594952680 -0.2042208422 0.0042754785 -0.0381311245 0.0659899914 -0.0714380713 -0.0813363600 -0.0359634340 -0.1345096364 -0.0500008975 0.0615748113 -0.0698806039 -0.0502252563 0.0031485812 0.0049924500 0.0063529697 0.0049596810 -0.0043733749 -0.0018570299 -0.0069255037 0.0020590678 -0.0002459357 0.0009819345 0.0037969669 0.0048576771 0.0049264885 -0.0031056000 -0.0012694618 -0.0058224831 0.0003819385 -0.0021002044 -0.0056477300 -0.0016393586 -0.0104480483 0.0040835855 -0.0042572948 -0.0099863564 0.0036903244 -0.0013821898 -0.0013220834 -0.0124974488 -0.0027374497 -0.0093419209 0.0064537110 -0.0111877550 -0.0109297781 -0.0004482190 -0.0002531563 0.0001148471 0.0003140455 0.0001648131 0.0000928947 0.0005666705 0.0001394422 -0.0003055236 -0.0004381428 -0.0001333467 0.0007004114 -0.0003486833 -0.0003183504 -0.0001049543 0.0014876303 -0.0005251152 -0.0001190626 -0.0000035878 0.0005367973 -0.0003136139 0.0013066123 -0.0003643274 -0.0016859364 0.0014518252 0.0018269496 -0.0002410387 0.0009740701 0.0009360636 0.0018392052 -0.0005619533 0.0014022707 0.0019121339 -0.0022461035 -0.0007594679 -0.0018900673 -0.0000919997 0.0003944389 0.0005472291 -0.0010714637 -0.0000789043 0.0008968180 0.0004017541 -0.0018589607 0.0008306300 0.0007377438 -0.0004418593 0.0000326378 0.0048376989 -0.0008490124 -0.0004545268 -0.0024094903 0.0006751170 0.0001374486 -0.0114611433 0.0003798882 0.0015763899 -0.0044342378 0.0038358808 -0.0006674239 0.0033356731 0.0014236733 -0.0012561183 -0.0026851931 -0.0010784643 0.0008787872 -0.0098481339 0.0033389625 0.0014518243 -0.0008659772 0.0022301347 -0.0006463786 -0.0011183656 -0.0042756556 0.0017410750 0.0014923122 0.0063476521 -0.0032942085 -0.0009449273 0.0001958009 -0.0016052997 0.0006404884 0.0016909874 -0.0002697397 0.0084017667 0.0045045590 0.0101688503 0.0019523760 -0.0019934825 0.0045302551 -0.0006611808 -0.0017191937 0.0003886553 0.0001312119 -0.0008703110 0.0008599647 0.0074464242 0.0016029377 0.0101623720 0.0009964187 0.0006141045 0.0011093124 -0.0113265516 -0.0043591068 0.0078539071 0.0266400826 0.0254338724 -0.0169770054 0.0044417145 0.0404958591 -0.0462101038 0.0730870322 0.0030236458 -0.0038160736 -0.0101341646 0.0043275989 -0.0000568699 0.0086353646 -0.0060601895 -0.0161507321 0.0198448262 -0.0114972372 0.0127967768 0.0172721682 -0.0055176015 0.0077720212 0.0032640746 0.0039610422 -0.0004817835 -0.0015117865 -0.0056701193 0.0029052056 0.0020284934 -0.0055667546 0.0017101501 0.0025232673 -0.0003665243 -0.0002596086 0.0025490682 0.0004818746 -0.0002373743 -0.0024059713 -0.0005676997 -0.0028577915 0.0002354744 0.0049867496 -0.0039227802 0.0005077193 -0.0017653264 0.0020466026 -0.0032286583 -0.0017263651 -0.0019300943 -0.0086721443 -0.0051149653 -0.0059757362 0.0023842661 -0.0005330258 0.0017941402 -0.0012174492 0.0004022908 0.0013858984 -0.0047391926 -0.0033745318 0.0034618780 0.0074302636 0.0033543446 -0.0054329628 0.0005260742 0.0008282108 -0.0023237707 0.0564818739 -0.0388607726 -0.0601272320 -0.0087608595 -0.0124977197 0.0004580015 0.0093498956 0.0032424826 -0.0044597417 0.0070906492 0.0085004087 -0.0015146695 -0.0005684410 -0.0043881576 -0.0009678440 -0.0104887161 0.0021880741 0.0071707270 -0.0002612467 -0.0058954472 -0.0020572348 -0.0028482885 0.0105535674 0.0047006822 -0.0008060975 -0.0057882485 -0.0026117410 0.0151289608 -0.0088104914 -0.0122954474 0.0001037922 -0.0081424615 -0.0016986436 0.0023255939 0.0007719701 -0.0018591756 -0.0117238745 0.0001056855 0.0085533543 0.0023973960 -0.0118350573 -0.0052682788 0.0009156779 -0.0031687570 -0.0009866911 0.0000316976 0.0004565820 -0.0000423925 0.0024255912 0.0017458561 -0.0008727052 0.0007637233 -0.0024301797 -0.0000312912 -0.0026933272 0.0044805261 0.0016385163 -0.0007338253 -0.0060017641 -0.0005418095 -0.0039935601 0.0061679618 0.0021795381 -0.0038741471 0.0061082226 -0.0093351140 0.0111894313 -0.0042359324 -0.0050998082 0.0004911053 0.0206572534 0.0031811283 0.0113448732 0.0076681813 -0.0035738525 -0.0013270053 -0.0062804535 -0.0007823552 0.0012973181 0.0277749171 0.0023520060 0.0016683930 0.0007490628 -0.0012707549 -0.0022093273 0.0008298378 0.0031375296 0.0029533022 -0.0014453158 -0.0023871837 -0.0015237584 -0.0000492870 0.0013131538 -0.0016267274 -0.0036738630 -0.0056422267 -0.0109829184 -0.0161265872 -0.0196341221 -0.0193514880 -0.0335868235 -0.0168710843 0.0209054193 0.0109424190 -0.0101018824 -0.0002682857 0.0000642658 -0.0000746399 0.0015895400 -0.0007758962 -0.0010108046 -0.0023929450 0.1839311708 -0.1610035615 -0.0301634437 -0.1495957685 0.2269612118 0.1911999890 0.2059685248 0.2420106229 0.4167286582 0.2842021970 0.1134635073 -0.1484937115 0.4270520450 -0.0066682770 0.0133700803 -0.2232839987 0.1384602907 -0.1896369226 -0.1426285756 0.1647887581 0.0913111699 -0.1364912906 -0.0310493177 -0.1697293120 0.1322469728 0.0052152681 -0.0194214077 0.0000561307 -0.0051068573 0.0072294869 0.0211042761 0.0121522638 -0.0152898809 -0.0060900367 0.0148591089 -0.0041868445 -0.0030564715 -0.0045389624 -0.0072218964 0.0042516690 0.0012489276 0.0076038672 -0.0024200909 0.0011462548 0.0012112949 -0.0035839176 -0.0036700628 -0.0063323786 0.0028197926 0.0006224122 0.0070565543 -0.0026393724 0.0005293131 0.0154227796 0.0031749862 0.0118885030 -0.0023428884 0.0080936735 0.0083450654 -0.0090968060 0.0013472819 -0.0006858659 0.0113309430 0.0020149121 0.0093481524 -0.0099305134 0.0146923099 0.0112442345 0.0020152014 0.0012050615 0.0005191430 -0.0018553478 -0.0007588130 0.0004063809 -0.0000630635 -0.0005152491 -0.0015624380 0.0012758123 0.0006000299 -0.0001290093 -0.0004978749 0.0000910059 0.0014980320 -0.0033616236 -0.0034834917 0.0024946382 -0.0012851813 -0.0013897345 0.0013353662 -0.0001586307 0.0001447783 0.0005157745 -0.0064355942 -0.0025229291 0.0017199308 -0.0019479610 -0.0006377550 -0.0000734810 0.0014927597 -0.0022904307 -0.0033038374 0.0055084763 0.0017898560 0.0049644258 0.0000794017 0.0000197509 0.0000333592 0.0001130626 -0.0000156507 -0.0001202807 -0.0005402253 0.0105060005 -0.0043187069 -0.0014068348 -0.0071384167 0.0031935503 -0.0106232710 0.0017547869 0.0009889395 0.0061710042 -0.0046711451 0.0007623465 0.0122114331 0.0004640918 -0.0015630260 0.0053632109 -0.0017627007 -0.0001674145 -0.0092274730 -0.0012785126 0.0022923081 0.0064038072 0.0039583816 -0.0026201515 0.0145544937 -0.0048922545 -0.0026790345 0.0024822499 -0.0029172455 0.0005685026 -0.0021127839 -0.0075682025 0.0033393270 0.0018378004 0.0057875777 -0.0026217054 0.0069715390 0.0027685569 0.0091734017 -0.0030314189 0.0010720820 -0.0055917172 -0.0112847780 -0.0066442843 -0.0154075479 -0.0039419146 0.0033400736 -0.0095197689 0.0059507575 0.0048344948 0.0050623849 -0.0052051324 -0.0067290010 -0.0026771593 -0.0061556593 0.0009676979 -0.0085312049 0.0006620765 0.0061464519 -0.0037871353 0.0029968081 0.0028791744 -0.0017392975 -0.0063096780 -0.0121945707 0.0103476360 -0.0029738530 -0.0123449444 0.0117239009 -0.0193036348 -0.0072125861 -0.0043842596 0.0007938024 -0.0021621572 0.0025187214 -0.0091973294 0.0327739331 0.0210507629 0.0114345239 -0.0328014999 -0.0253534015 0.0006430717 0.0346064920 -0.0468217743 0.0012988918 -0.0023345541 0.0009912617 0.0045025425 0.0024157883 -0.0011790346 -0.0038513313 0.0029200038 -0.0006679478 -0.0057743651 0.0039177794 -0.0015242826 0.0043907045 -0.0017497258 0.0004254815 0.0022876995 0.0027324056 0.0009734968 -0.0023789618 -0.0043264237 -0.0004460036 -0.0022650644 -0.0021166738 -0.0010760397 0.0011743150 0.0006799818 0.0010602170 -0.0006550970 -0.0018348550 0.0000449560 0.0007532875 -0.0005936415 0.0000075262 0.0003212365 0.0001814927 0.0001982003 -0.0014294758 0.0008628178 -0.0007598772 0.0008609472 -0.0006231989 0.0002717943 0.0016113320 -0.0009197026 0.0015821696 0.1707531595 -0.1226619295 -0.2091915917 -0.0152434163 -0.0325901545 -0.0027218156 0.0242906469 0.0032816879 -0.0134986905 0.0270382958 0.0198546485 -0.0119045829 -0.0015505052 -0.0066389371 -0.0008809045 -0.0318847111 0.0075108593 0.0221699080 -0.0015117128 -0.0129295830 -0.0040053202 -0.0033132787 0.0313051212 0.0124260849 -0.0008015260 -0.0147249690 -0.0059139790 0.0550896586 -0.0299365324 -0.0427632000 -0.0011875648 -0.0453873655 -0.0157258287 0.0046884920 0.0043592162 -0.0006202589 -0.0433428423 0.0104747572 0.0296738240 0.0346694791 -0.0527880005 -0.0259453198 0.0067435940 -0.0170744887 -0.0055382591 0.0068620836 0.0045249394 -0.0022274786 0.0006986005 0.0092032144 0.0009223053 0.0055795441 -0.0123032294 -0.0039755391 -0.0121909139 0.0162707847 0.0074052624 -0.0026224768 -0.0224004504 -0.0022008308 0.0022394448 0.0095040295 0.0020004538 0.0068632848 0.0671581416 0.0065966442 0.0331978157 -0.0117828541 -0.0160852484 0.0007598172 0.0542317772 0.0081557299 0.0237520160 0.0156156097 -0.0078434408 -0.0069298551 -0.0163030981 -0.0008388286 -0.0025192006 0.0082667820 -0.0045232926 -0.0002874655 -0.0005128524 -0.0005838697 0.0096654728 -0.0149638436 -0.0118145039 -0.0164642537 0.0051626908 0.0093054800 0.0089777460 0.0053376411 -0.0005198265 0.0012365883 -0.0005880218 0.0035341645 0.0052619168 0.0050034319 0.0006027115 -0.0205276011 0.0125526802 0.0042024629 0.0347107472 -0.0257809150 0.0226153170 0.0014812521 0.0013415094 -0.0007879012 -0.0021395800 0.0129529445 0.0060846978 -0.0389004934 -0.0641372844 0.0428282546 -0.0074482630 0.0460320697 -0.0199652554 -0.0294793611 -0.0568111500 -0.0613632610 -0.0153747120 0.0237086826 0.1369410304 0.0103820676 -0.1537060684 -0.1709980390 0.2752247005 -0.0399512971 -0.0363899886 0.1166908420 0.1192589604 0.2431756002 -0.0908823719 0.2844205261 -0.4411794826 -0.5038984329 -0.0584133072 -0.1169107349 0.0406269876 -0.0564944696 -0.0690123667 -0.0098870823 -0.0942052799 -0.0066698906 0.0146808065 -0.0484615071 -0.0091995323 -0.0007198786 -0.0002385363 -0.0014644199 -0.0012056689 0.0005013926 0.0000255437 0.0009221457 -0.0000002068 0.0005553764 0.0002482242 -0.0007193155 -0.0008720627 -0.0002494346 0.0003000305 0.0001442018 -0.0001328732 0.0006060478 0.0008491489 0.0020832376 -0.0008976281 0.0029719079 0.0026487832 -0.0023302808 0.0000556037 -0.0010271045 0.0000571697 -0.0005044652 0.0028884312 -0.0003539374 0.0020770099 0.0004426379 0.0008287975 0.0003329832 0.0007679439 0.0004919269 0.0005497423 -0.0011541516 -0.0007600427 -0.0010775261 0.0010989794 0.0005387983 0.0003674673 0.0011351780 0.0008443742 0.0006151399 -0.0014907249 -0.0009870410 -0.0008581360 -0.0020758267 0.0000036432 0.0012048880 0.0014355800 0.0032175354 0.0034505060 -0.0033614568 -0.0013857600 -0.0002759386 0.0001146728 -0.0002060820 0.0013653147 0.0015431180 0.0017895846 0.0035791797 -0.0000236205 0.0000030228 -0.0000618246 0.0005747171 0.0001884933 0.0006248605 0.0002153021 0.0009775728 0.0015803138 0.0021767303 0.0000622913 -0.0014205790 0.0012348965 -0.0082247599 0.0030897624 0.0005336165 0.0060643252 -0.0025486046 0.0034835830 0.0000801367 -0.0005534467 -0.0024537742 0.0023438369 -0.0004775931 0.0024734491 -0.0001375747 -0.0007137910 -0.0008133661 -0.0011562645 0.0004874355 0.0031699065 -0.0002847988 -0.0004376283 -0.0017121044 -0.0016421324 0.0009131323 0.0017197462 -0.0001629981 -0.0005006951 -0.0011678312 -0.0005989913 0.0003972936 -0.0008291070 -0.0042360166 0.0023392817 0.0016285891 0.0064449314 -0.0032829612 0.0003868779 0.0000674133 0.0006487980 -0.0002328086 0.0018058106 -0.0017280352 0.0039259035 0.0015737105 0.0050033235 0.0010696183 -0.0022509963 0.0030773516 0.0010663422 -0.0003716984 0.0019435707 -0.0009327906 -0.0018184784 0.0000118733 0.0030204398 0.0005503781 0.0043912019 -0.0000686236 -0.0003461109 -0.0000619845 0.0001529110 0.0103871646 0.0030479725 -0.0043407264 -0.0375894963 0.0386073069 -0.0108478560 -0.0063201443 -0.0226085131 0.0090934799 -0.0489306934 -0.0405477562 -0.0245104708 0.0130567372 0.0069104983 0.0701251012 -0.0431627864 -0.0757097803 0.0689698599 -0.0663906010 0.0070267709 0.0960813440 -0.0209176912 0.0241274782 0.0005294842 0.0078690031 -0.0012798663 -0.0146717971 -0.0033235783 0.0039704980 0.0039936901 -0.0050032174 0.0011948145 0.0051557915 -0.0045728698 0.0017475842 -0.0024368008 -0.0007790971 0.0002896172 -0.0034320875 -0.0033601076 -0.0021917034 0.0026300131 0.0067952249 -0.0009706329 0.0025991510 0.0015550443 0.0020341703 -0.0024217423 -0.0010906722 -0.0024835928 -0.0013484055 0.0001965990 -0.0012559931 0.0002824772 0.0002641111 0.0009824983 -0.0007791312 -0.0001233527 0.0006293924 0.0007304226 -0.0004726242 -0.0008442634 -0.0001333669 0.0003698230 0.0003725312 -0.0004690677 -0.0004709567 0.0006066362 -0.0440430419 0.0326210797 0.0608102280 -0.0029326448 0.0048874106 0.0032687606 -0.0038866049 0.0029020984 0.0034111234 -0.0094562486 -0.0024875956 0.0061735487 -0.0004326781 -0.0017527166 -0.0002811706 0.0084023428 -0.0020462944 -0.0058907114 0.0004624574 -0.0002705795 -0.0004562775 -0.0005377463 -0.0076171632 -0.0035849593 -0.0017461310 0.0044233815 0.0015422628 -0.0206940047 0.0104466764 0.0157949710 0.0002731579 0.0239544669 0.0093402487 -0.0012767912 -0.0013855403 -0.0003677414 0.0146879731 -0.0062380714 -0.0096928500 -0.0192451546 0.0207558933 0.0109935308 -0.0019788384 0.0065263198 0.0016154115 -0.0020601854 -0.0013826116 0.0007094203 -0.0002703229 -0.0036093590 -0.0003437316 -0.0023482010 0.0050354068 0.0019753898 0.0042638115 -0.0059330949 -0.0026347993 0.0006112965 0.0081644712 0.0009552476 -0.0014405829 -0.0035573891 -0.0012704063 -0.0050925327 -0.0270562421 -0.0069222305 -0.0105122570 0.0028941598 0.0048263264 -0.0007601366 -0.0200657894 -0.0031202394 -0.0092539797 -0.0058889838 0.0027164729 0.0035191536 0.0022263634 -0.0001349790 0.0010870320 0.0417865492 0.0032451135 0.0001964392 0.0008100384 0.0019865477 -0.0033982155 0.0097340227 0.0064810413 0.0141513950 -0.0016805567 -0.0071687151 -0.0073319452 -0.0038502551 -0.0001346759 -0.0008833625 -0.0053282766 0.0004215644 0.0064993523 0.0039701144 -0.0119045433 0.0035805991 -0.0201791635 -0.0105742694 -0.0235584897 -0.0310658963 0.0347553599 -0.0041901468 0.0001087506 0.0016705368 -0.0012920855 -0.0118053290 -0.0083503547 -0.1152067273 -0.0337267758 -0.0089477580 -0.0421838863 -0.0005170919 0.1392199621 0.0812064788 0.0014621550 0.0250955490 0.1858575378 0.1087578109 -0.0321445491 -0.0680520926 0.2718770335 0.1039242215 -0.1587907935 -0.0749612757 0.0845124750 0.4412204984 0.3423830564 -0.2394388473 -0.2253682347 0.4171605351 -0.1538553834 0.1025535218 -0.3177105183 -0.0743664571 0.0251989169 0.0429954080 0.0667107099 0.0171202414 0.0322217489 0.0332969264 -0.0188340878 0.0839674309 0.0086926998 -0.0028998701 -0.0056353950 -0.0059419603 -0.0082199241 0.0056546420 0.0019540354 0.0098661098 -0.0038459761 0.0002271716 -0.0008727072 -0.0038716828 -0.0048638730 -0.0089683147 0.0049573545 0.0013275086 0.0106118508 -0.0040179962 0.0005307842 0.0169231798 0.0043981541 0.0140049521 -0.0091213918 0.0146914278 0.0133432970 -0.0050798301 0.0002998768 -0.0012774428 0.0126227449 0.0026691552 0.0136596513 -0.0137645924 0.0203681530 0.0165173452 -0.0003474082 -0.0004771759 -0.0012173689 0.0013541358 0.0008432921 0.0009379407 -0.0013304886 -0.0002710315 0.0009837119 -0.0008705554 -0.0008385169 -0.0012604268 0.0017723815 0.0010017567 0.0004407870 -0.0004237152 -0.0005420773 -0.0014346657 -0.0024504910 -0.0022542701 -0.0045832865 0.0013193027 0.0007417912 0.0002705515 0.0006832052 -0.0000800370 -0.0020088600 -0.0021523067 -0.0024255153 -0.0053303150 0.0005147062 -0.0007208243 -0.0011624198 0.0037496435 0.0011879369 0.0033162847 -0.0001197779 -0.0005420598 -0.0008066874 -0.0006670927 -0.0000296707 0.0004424630 -0.0011485498 0.0068144673 -0.0026939869 -0.0019677722 -0.0030978798 0.0015905315 -0.0062454020 0.0002097119 0.0009100758 0.0030438492 -0.0011036076 -0.0000853069 0.0090663031 -0.0008636533 -0.0008035425 0.0054835090 -0.0048964874 0.0009942665 -0.0041695296 -0.0011347573 0.0012580474 0.0032006363 0.0015686935 -0.0011556585 0.0065667274 -0.0027966472 -0.0008564521 0.0013220856 -0.0019534457 0.0005358779 0.0001099669 0.0021896973 -0.0016741159 -0.0011840226 -0.0054199277 0.0029584019 0.0023723803 0.0010349568 0.0030585363 -0.0009506745 -0.0017525424 -0.0001302029 -0.0093426316 -0.0047504092 -0.0125825804 -0.0027668121 0.0039966762 -0.0076787749 0.0013269452 0.0024468918 0.0000265284 -0.0010465395 -0.0004714116 -0.0012148207 -0.0066993367 -0.0006530384 -0.0095442791 0.0000688621 0.0021947464 -0.0016899577 0.0009559217 -0.0046450086 -0.0033376437 0.0048924385 0.0135846086 -0.0165112272 0.0042310343 -0.0060200274 0.0304718858 -0.0244536767 0.0244677093 0.0224471483 0.0080566853 -0.0030419055 0.0003101208 -0.0368274704 -0.0052575460 0.0282064594 -0.0395095365 0.0092044516 -0.0365045431 0.0013921860 0.0116580475 -0.0182994641 -0.0127773842 -0.0251042719 -0.0150098596 0.0308472504 -0.0071431437 -0.0206807175 0.0121020113 0.0014640469 0.0010757569 0.0425128123 0.0034229627 -0.0032823914 -0.0402987285 0.0112841617 -0.0003254594 0.0032827425 0.0021335280 0.0020139684 -0.0070245008 -0.0113365953 0.0027597266 -0.0032122462 -0.0011027115 -0.0033283493 0.0042309195 0.0035117376 0.0027936841 0.0095335082 0.0042042379 0.0094671652 0.0002509130 -0.0005495493 -0.0004395060 0.0091109437 0.0052986715 -0.0021033984 -0.0011972662 -0.0004945660 -0.0002881505 0.0004982365 0.0000802693 0.0002662824 0.0019604570 0.0066461789 0.0002981180 0.0278771150 -0.0152714266 -0.0347566000 0.1005307013 0.0589183926 -0.0357548282 -0.0369333103 -0.0508110025 0.0039677890 0.0210960957 -0.0371873877 -0.0314570146 0.0146508711 0.0420782911 0.0028385430 0.0015329565 -0.0006676092 -0.0008696518 0.0021584352 0.0548702230 0.0194671438 0.0138122402 -0.0089387781 0.0075388939 0.0289146841 0.0005923510 -0.0001519611 0.0898632062 -0.0374952998 -0.0672451541 0.0062728259 -0.1548842632 -0.0676204218 0.0039764160 0.0069277912 -0.0008471623 -0.0321703482 0.0215732774 0.0260938013 0.0647041190 -0.0520398341 -0.0558572748 0.0013841075 -0.0144627943 -0.0026238089 -0.0051246699 0.0014897652 0.0024582808 0.0100043857 0.0074056594 -0.0033643837 0.0061352280 -0.0164630801 -0.0052131810 -0.0070492127 0.0188923347 0.0055414990 -0.0019658887 -0.0243192344 -0.0026975690 -0.0193825826 0.0285618501 0.0129229761 0.0090107008 0.0386085316 0.0037264905 0.0283545969 -0.0011283081 -0.0109242427 0.0030218772 0.0876153234 0.0119595706 0.0466443389 0.0348412578 -0.0149706720 -0.0199852844 0.0302060925 0.0044081047 0.0007232450 -0.5662827393 -0.0651254004 0.0004134716 -0.0013595385 -0.0049665743 0.0004246845 -0.0078915138 -0.0028438626 0.0100422924 0.0096147750 0.0012679217 -0.0036891220 -0.0031277172 -0.0002277225 -0.0013161886 -0.0018436415 -0.0003873069 0.0033977106 0.0007721325 -0.0057939395 -0.0006951470 -0.0058376353 -0.0072236267 -0.0057240406 -0.0018179270 0.0035222448 -0.0033674510 0.0005665792 0.0023685517 0.0026657760 -0.0036330092 -0.0031460650 -0.0595832410 -0.0073008154 -0.0115777260 -0.0218089858 -0.0008332088 0.0725009398 0.0422713437 0.0072887328 0.0187546629 0.0778406828 0.0518171829 0.0175792246 -0.0269161447 0.0961968662 0.0281737061 -0.0314674129 -0.0507161719 0.0407043926 0.0547402374 0.0398933074 -0.0558581715 -0.0252660261 0.0391041117 0.0118512774 0.0539895720 -0.0453094067 -0.0035079204 -0.0190960674 0.0097985500 0.0083376970 0.0071646643 0.0203898670 0.0062369905 -0.0141200066 0.0035916372 0.0122426894 0.0434379551 0.0774521769 0.1081578460 0.1029345485 -0.0767524071 -0.0335991738 -0.1300389356 0.0438287703 -0.0102560150 0.0249520899 0.0577863952 0.0803381784 0.1210767224 -0.0651939979 -0.0175464421 -0.1297829115 0.0332200445 -0.0278621650 -0.2469038147 -0.0556497090 -0.2063389438 0.1140111205 -0.1878475047 -0.1839307228 0.0128704198 -0.0030669690 0.0052025242 -0.2127602648 -0.0600391095 -0.1702450801 0.1136065445 -0.2285058094 -0.1883308643 0.0018865342 0.0017808543 0.0032448732 -0.0040970901 -0.0025900913 -0.0022795056 0.0025874959 0.0002866811 -0.0027909622 0.0041378580 0.0030575904 0.0035855759 -0.0061236241 -0.0037559926 -0.0022296073 -0.0050473861 -0.0008318763 0.0053183527 0.0054532157 0.0081988583 0.0127880626 0.0010297551 -0.0001656587 -0.0006223226 -0.0040019822 0.0009743078 0.0059999834 0.0060410415 0.0076798800 0.0158788458 0.0037141459 -0.0035294142 -0.0052162361 -0.0188882360 -0.0049388889 -0.0148741847 -0.0000692308 0.0002698582 0.0001825671 -0.0014016773 -0.0000810518 0.0008586580 -0.0132035183 0.0370828665 -0.0111058050 0.0046320619 -0.0510903859 0.0198883921 0.0028517800 0.0058225613 -0.0030664047 0.0144233764 -0.0243745096 0.0067659304 -0.0779690689 0.0160050915 0.0082332239 -0.0350267982 0.0705529897 -0.0205762392 -0.0196227375 0.0159414288 -0.0028700155 -0.0023534031 0.0007361327 0.0001255311 -0.0085491201 0.0171367361 -0.0041374216 0.0322856423 0.0524441971 -0.0250643403 0.0023817824 0.0048203277 -0.0011647790 0.0022624717 0.0008915941 0.0024987892 -0.0080540594 -0.0015786654 -0.0116036656 0.0044440669 -0.0016445424 0.0082057731 0.0143573594 0.0086536544 0.0165306178 0.0039379388 0.0021842977 0.0051806931 -0.0087159844 -0.0065154057 -0.0078807791 0.0051787073 0.0057779289 0.0033596827 0.0174473238 0.0032245480 0.0222143858 0.0036180496 0.0016034396 0.0044883889 0.0037576197 0.0069263957 -0.0006339928 -0.0132777259 -0.0261876456 0.0252837050 -0.0075988685 -0.0163616798 -0.0023628442 -0.0124648992 -0.0256259449 -0.0202333342 -0.0076884498 0.0075594708 0.0036488888 0.0122753050 -0.0466475127 -0.0294389333 0.0127062432 -0.0274318785 -0.0198216394 0.0570172004 -0.0121876013 0.0149507609 0.0104033341 -0.0037185822 -0.0022764373 0.0175928647 -0.0061202076 -0.0030371679 -0.0049361362 -0.0018978223 0.0015107629 0.0063207099 0.0225721019 -0.0164289589 -0.0025060531 -0.0033070089 0.0027913302 -0.0441206360 -0.0139402562 -0.0443477185 0.0415638351 0.0000380003 0.0570831527 0.0134719612 0.0103011323 0.0122966466 0.0100392988 0.0018618754 -0.0177504580 0.0196874554 0.0049955365 0.0063930277 0.0062862667 -0.0043020575 0.0136193364 -0.0002621648 0.0013203421 -0.0006174860 0.0052310891 -0.0009762627 -0.0010895595 -0.0056774742 -0.0006060532 0.0028259461 -0.0025705079 0.0000905700 -0.0011649750 -0.0608969893 0.0418333819 0.0881461228 -0.0205778706 -0.0033975440 0.0083663659 0.0014122993 0.0112634411 0.0034681588 -0.0126398677 0.0032868491 0.0107766074 -0.0033532256 -0.0068718880 0.0001226962 0.0106794656 -0.0036608324 -0.0078269590 -0.0011112139 -0.0078410988 -0.0022651281 -0.0015403560 -0.0094689820 -0.0062209535 -0.0065099715 0.0026291831 0.0022334297 -0.0429985586 0.0189634863 0.0319286391 -0.0022076460 0.0466782282 0.0202763125 -0.0029122832 -0.0035260463 0.0003228887 0.0209688395 -0.0068361029 -0.0162275435 -0.0187629705 0.0245583732 0.0224722284 -0.0011642925 0.0096215715 0.0021472338 -0.0012847871 -0.0014731536 0.0003605095 -0.0021245099 -0.0055169472 0.0001750538 -0.0034888041 0.0070838749 0.0023145155 0.0061362026 -0.0097882901 -0.0038667763 0.0008824665 0.0130368370 0.0015318761 0.0003934785 -0.0081046419 -0.0011382044 -0.0037558833 -0.0347032106 -0.0005252652 -0.0210205194 0.0064307276 0.0087951002 -0.0013987797 -0.0359719448 -0.0049488621 -0.0195744374 -0.0132243457 0.0064335109 0.0070486418 -0.0009383752 -0.0003770699 -0.0022784727 0.1184830410 0.0067060211 -0.0402312634 0.0063259725 0.0967065973 -0.0009242733 0.0010940146 0.0016738424 -0.0062757049 -0.0025828813 0.0010607466 0.0023762629 0.0024467199 0.0001365650 0.0053633928 -0.0011278666 0.0006493227 -0.0049662819 0.0004787004 0.0106207357 0.0254031324 -0.0133807000 -0.0030345983 0.0282013540 -0.0040741299 0.0014840320 0.0021865331 -0.0004037372 -0.0023590898 -0.0014033939 0.0049850131 0.0009802515 0.0910592153 0.0002452069 0.0288962963 0.0364535506 0.0074508084 -0.1250946043 -0.0738252642 -0.0264371484 -0.0446148461 -0.0244997173 -0.0628164764 -0.2122444560 0.0034130752 0.1479701442 0.2420796727 -0.3656462565 0.0912604579 0.0219693199 -0.0809822430 -0.0419325157 0.2394669730 0.0241138387 0.0267683787 -0.2226342233 -0.3483803853 0.0737325104 -0.0473647326 0.0208609473 -0.0230662910 -0.0278262779 0.0060019645 -0.0291483749 0.0217330782 -0.0103096154 -0.0083006542 0.0099422127 0.0027765616 0.0106086903 0.0130487564 0.0104211636 -0.0096386009 -0.0059809446 -0.0163610025 0.0073067295 0.0005175684 0.0061795921 0.0058948436 0.0097247415 0.0160343147 -0.0101704815 -0.0040927533 -0.0199399819 0.0082212695 -0.0014243189 -0.0279399558 -0.0095684608 -0.0229744250 0.0239875651 -0.0317296272 -0.0268158040 -0.0016873502 0.0015242192 0.0027181855 -0.0167971422 -0.0102647453 -0.0198672927 0.0221688012 -0.0387528327 -0.0271560464 -0.0786205476 -0.0564322432 -0.0598637659 0.1021334591 0.0556785814 0.0244707087 -0.0328559024 0.0078082989 0.0734772245 -0.0905839089 -0.0582747950 -0.0456381284 0.1002290183 0.0523026920 0.0044502594 0.1911350586 0.0650139405 -0.1376373439 -0.0529795444 -0.0922610530 -0.2222877033 0.0002381069 0.0085944947 0.0024014456 0.2013745374 0.0559348789 -0.1259595135 -0.0498795309 -0.0841463325 -0.2277485678 0.0014277486 -0.0022862711 -0.0029536390 -0.0013120029 -0.0002918012 -0.0011705031 -0.0021612301 -0.0090438722 -0.0126900928 0.0085956172 -0.0002085809 -0.0034196762 -0.0002075543 0.0069681570 -0.0025918944 0.0029976088 -0.0210682581 0.0092142680 -0.0258768377 0.0123647321 -0.0008231607 0.0202414742 -0.0158551111 0.0027015447 0.0437605950 0.0093507211 -0.0089395679 0.0038257930 0.0209616744 -0.0086140561 -0.0363745632 0.0029378945 0.0055116028 0.0158905450 0.0036671355 -0.0041576809 0.0680400207 -0.0081352210 -0.0118474980 0.0316000226 0.0224065093 -0.0141977069 0.0201789926 0.0737877161 -0.0310522381 -0.0274063949 -0.0549855712 0.0095436546 -0.0320846954 -0.0296355331 -0.0288397589 0.0040347091 0.0004801979 0.0060153788 0.0148459800 -0.0087435212 0.0354395299 0.0227750504 -0.0660129182 0.0886000518 -0.0124846232 -0.0159683877 -0.0058982162 0.0265125140 0.0407767312 0.0084536330 -0.0396026828 -0.0327736925 -0.0380246766 -0.0366246042 -0.0908543006 0.0154690890 -0.0015436135 -0.0029381441 0.0015307951 -0.0022774395 0.0151405125 -0.0123174650 0.0019278515 0.0088238908 -0.0154332480 0.0188426109 0.0113002067 0.0072841576 0.0082936785 -0.0065220949 -0.0036329625 -0.0210348578 0.0407986389 0.0331437828 -0.0178463193 0.0294918853 0.0135477056 -0.0567372176 0.0122822148 -0.0131080773 0.0156548123 -0.0102369530 0.0043108196 0.0329796533 0.0001863942 -0.0029409734 -0.0162475522 0.0049762942 -0.0002374441 -0.0141922993 0.0315955141 -0.0173725801 0.0195407300 -0.0041841931 0.0011219344 -0.0176783333 -0.0023541129 -0.0186034558 0.0160509676 -0.0180695029 0.0337950302 0.0002690593 0.0001432274 0.0023617886 0.0122780669 0.0070215984 -0.0062222518 0.0167421711 0.0017443717 0.0109886372 0.0042301923 -0.0028803543 0.0056195523 -0.0029343819 -0.0002197954 0.0012281511 -0.0033321869 -0.0016553546 0.0023384235 0.0045061357 0.0010366325 -0.0023517245 0.0002936561 0.0009615037 -0.0022390292 0.0776614283 -0.0560010625 -0.1105291956 -0.0048532810 -0.0140003200 -0.0031928424 0.0107668183 -0.0001679970 -0.0064653247 0.0125857075 0.0080823564 -0.0059960912 -0.0006078292 -0.0002402152 0.0004312856 -0.0150590560 0.0030700401 0.0103568331 -0.0005563929 -0.0036853788 -0.0011436006 -0.0006097119 0.0138825579 0.0053916904 0.0006752863 -0.0117889829 -0.0037177312 0.0270335252 -0.0151547523 -0.0209314028 -0.0004066796 -0.0267571031 -0.0102913162 0.0029792008 0.0015342381 -0.0008494632 -0.0211723217 0.0052357038 0.0159323537 0.0138194907 -0.0228698580 -0.0185979662 0.0010050434 -0.0099020889 -0.0020983617 0.0022372394 0.0013195280 -0.0007947287 0.0012044787 0.0056254753 0.0002562835 0.0033159744 -0.0058493344 -0.0020143236 -0.0064707545 0.0091158303 0.0038736561 -0.0006829447 -0.0119520987 -0.0014648026 0.0028981251 0.0053949284 -0.0006877509 0.0033086258 0.0359058826 0.0002237037 0.0216989320 -0.0078787116 -0.0089051597 0.0013595790 0.0303105304 0.0041914812 0.0174170416 0.0110164663 -0.0058398929 -0.0035984510 -0.0071778602 -0.0006313192 -0.0018675848 -0.0068859985 0.0080862338 -0.0231147419 0.0012363690 0.0497474481 0.0041165207 -0.0025645028 -0.0032354362 0.0059678327 0.0043249537 -0.0000487818 -0.0025681847 -0.0030378198 -0.0001091123 -0.0061309650 0.0017107332 -0.0014699926 0.0084035923 -0.0011781275 -0.0164242350 -0.0320584664 0.0158139461 0.0040601812 -0.0306654613 0.0059025809 -0.0028958145 -0.0023359692 0.0008089335 0.0028764994 0.0016790872 -0.0040607018 0.0000369346 -0.1543738343 -0.0054705825 -0.0427612010 -0.0617391237 -0.0020261499 0.1987374032 0.1163756502 0.0345619318 0.0646957838 0.0373049800 0.0822055901 0.2630727403 -0.0069397131 -0.1771156441 -0.3009640040 0.4546276182 -0.1147394976 -0.0266268162 0.0712363988 0.0312272135 -0.2602702342 -0.0167878507 -0.0492131130 0.2569811115 0.3878610659 -0.0686443167 0.0570758791 -0.0252610732 0.0200674831 0.0226522734 -0.0098508362 0.0258159076 -0.0305662186 0.0156757298 -0.0016914308 -0.0138609267 -0.0069717210 -0.0013798752 -0.0084431782 -0.0112340426 0.0045116489 -0.0001014411 0.0084181887 -0.0002707131 0.0041834829 0.0010240641 -0.0042728617 -0.0048474828 -0.0074061378 0.0015789238 -0.0015402083 0.0036705404 0.0018740281 0.0044677434 0.0375416583 0.0011623001 0.0222261544 0.0069167105 0.0030967692 0.0067070830 0.0027402230 -0.0018235886 -0.0025838939 0.0228905546 0.0005870605 0.0110056708 0.0056163791 0.0031673753 0.0031259126 -0.0426759709 -0.0300499658 -0.0302799939 0.0528593519 0.0281580559 0.0099008930 -0.0141540200 0.0058001321 0.0399741494 -0.0469345923 -0.0295298376 -0.0217601544 0.0497917615 0.0253227356 -0.0004113592 0.1055162909 0.0356597916 -0.0722342393 -0.0218871980 -0.0410019038 -0.1093840200 -0.0054136779 0.0019359629 -0.0000380734 0.1115250107 0.0324540917 -0.0645348887 -0.0203843241 -0.0392196584 -0.1103103860 -0.0017039901 0.0027222883 0.0034509349 -0.0008139552 -0.0002406643 -0.0003951920 -0.0007999108 -0.0029820112 -0.0038296891 0.0078399648 -0.0000835009 -0.0037876925 0.0037245237 -0.0155481616 0.0054171662 0.0045469246 0.0000073365 0.0000220024 -0.0145052019 0.0108169888 -0.0018949027 0.0113292593 -0.0074803297 0.0010295165 0.0468744552 0.0072553704 -0.0098676810 0.0025266899 0.0132218721 -0.0056247505 -0.0235378717 0.0009413685 0.0041449305 0.0099815092 -0.0005596420 -0.0015586485 0.0678429815 -0.0093919950 -0.0124555912 0.0230566016 0.0153762001 -0.0101526461 0.0121206286 0.0353205435 -0.0107216885 -0.0120689970 -0.0158144761 -0.0030295032 -0.0220534512 -0.0195294960 -0.0203501978 0.0029421657 0.0051826591 0.0006222025 0.0272915550 0.0026137875 0.0455070958 0.0184866127 -0.0491798122 0.0686104316 -0.0076774310 -0.0135117494 -0.0006589871 0.0163052347 0.0230900405 0.0066564741 -0.0119568970 -0.0186027121 -0.0047754239 -0.0236417902 -0.0603998813 0.0117609424 0.0013499412 0.0045833673 -0.0017881980 0.0054014454 -0.0236955164 0.0195932485 -0.0036535190 -0.0118947275 0.0209417911 -0.0244842596 -0.0192184937 -0.0131125104 -0.0178017026 0.0120125487 0.0066625654 0.0366702271 -0.0655585824 -0.0577661882 0.0367633206 -0.0623622796 -0.0289403353 0.1147142534 -0.0195845909 0.0173397775 0.0105954545 -0.0107824059 -0.0080528477 0.0202492738 -0.0052030216 -0.0088242358 -0.0082798798 0.0014217926 0.0014931641 0.0145415429 0.0278315022 -0.0145954536 -0.0042944079 -0.0018170286 0.0018284397 0.0118308377 0.0089974326 0.0084530030 -0.0133195356 -0.0309789583 0.0071252460 -0.0093633530 -0.0049366935 -0.0082686365 0.0099695127 0.0058220805 0.0127894134 0.0045741992 0.0016072909 0.0053832024 -0.0018921598 0.0004010350 -0.0029756368 -0.0008254299 -0.0007985569 -0.0017146693 0.0004906987 0.0017296420 0.0011565939 -0.0000394667 -0.0010572805 -0.0008675553 -0.0014655450 -0.0084904532 -0.0001555708 0.0297701096 -0.0296948745 -0.0321936018 -0.1527379078 -0.0994818916 0.0514661091 0.0605828910 0.0727295138 -0.0104428619 -0.0192240482 0.0625535763 0.0405013625 -0.0235169548 -0.0577719083 -0.0017461266 -0.0108090819 0.0004773134 0.0063492038 -0.0062501524 -0.0795579132 -0.0262170941 -0.0144106589 0.0210561247 -0.0096155237 -0.0431119084 -0.0065145027 0.0001316993 -0.1139964545 0.0425476309 0.0834042983 -0.0122199371 0.1922376100 0.0878169999 -0.0043044555 -0.0096452419 0.0001201284 0.0276116433 -0.0253124225 -0.0234623716 -0.0704907866 0.0483344364 0.0574117664 0.0010328282 0.0136583748 0.0014205512 0.0081736157 -0.0010676606 -0.0036747452 -0.0113809299 -0.0076046787 0.0039436254 -0.0069161886 0.0184044105 0.0058802207 0.0050203659 -0.0190767928 -0.0049221534 0.0013256012 0.0251242060 0.0031021272 0.0214012223 -0.0314093300 -0.0146953990 -0.0104142925 -0.0412596703 -0.0044335687 -0.0240954493 -0.0034179225 0.0110375136 -0.0040487543 -0.0931388664 -0.0123928890 -0.0502776173 -0.0386164181 0.0157028452 0.0240693925 -0.0472829692 -0.0053520370 -0.0061014756 0.7800771906 0.0683037854 0.0055521726 -0.0036522030 -0.0224086765 -0.0010758855 0.0108523376 0.0041462999 -0.0067043247 -0.0120950570 -0.0043321051 0.0022621152 0.0025571420 0.0005145599 -0.0002237922 0.0009929304 -0.0002967151 -0.0016211452 -0.0013784398 0.0008813719 -0.0084988478 0.0016451285 0.0016737123 -0.0047680578 -0.0004897434 0.0007176840 0.0020920124 -0.0002216445 -0.0013576311 -0.0026334025 -0.0003468820 0.0012344791 0.0202195401 0.0137149682 -0.0060293431 0.0057525577 -0.0071581472 -0.0131127526 -0.0055959995 0.0101488285 0.0072958997 0.0188800764 0.0246124835 0.0589716821 -0.0061090434 -0.0318102918 -0.0683100250 0.1055757380 -0.0244393289 -0.0084969314 0.0197603484 0.0120965649 -0.0390054798 -0.0074240095 0.0027875437 0.0271704973 0.0515142897 -0.0143012466 0.0067233492 0.0171414660 0.0060627329 0.0138271112 -0.0053964321 -0.0029983235 -0.0054413871 0.0131794021 0.0159934532 -0.0132524306 0.0180045928 0.0320951500 0.0448030034 0.0453244350 -0.0347222386 -0.0169462653 -0.0611155691 0.0255264675 0.0006911407 0.0191181632 0.0186267870 0.0300557330 0.0605835602 -0.0325323817 -0.0085513238 -0.0700417739 0.0271222514 -0.0050549014 -0.1418342840 -0.0351534821 -0.0949075912 0.0794613742 -0.1135180900 -0.0949456458 -0.0158721579 0.0055151826 0.0055047284 -0.0752058858 -0.0312976465 -0.0721500066 0.0707579471 -0.1228933969 -0.0952471558 0.0116817416 0.0097420282 0.0142996398 -0.0199410200 -0.0117963724 -0.0080001654 0.0096056287 -0.0003872118 -0.0153992479 0.0167779011 0.0122181172 0.0128706602 -0.0228891749 -0.0127925736 -0.0043264872 -0.0250864571 -0.0061825246 0.0258431310 0.0205464884 0.0231459084 0.0532899408 0.0005422114 -0.0009361580 0.0010970689 -0.0309636255 -0.0072029287 0.0275419355 0.0197611477 0.0250304554 0.0596202374 0.0063588942 -0.0092741613 -0.0128627481 0.0020000612 0.0010009833 0.0020282426 0.0004257459 0.0007662102 0.0011236640 -0.0026059215 0.0001247989 0.0008986355 -0.0095989143 -0.0001911127 0.0020692307 0.0067644232 -0.0200538915 0.0071667939 -0.0082050699 0.0142991566 -0.0043679424 0.0187333701 -0.0177350769 0.0036408042 0.0047547800 0.0165537529 -0.0061513709 -0.0170378921 0.0550687985 -0.0180326675 -0.0307134669 0.0105045990 0.0018324694 0.0035490985 -0.0059776570 0.0015454561 0.0780944225 -0.0009559547 -0.0190741919 0.0476989437 0.0559314238 -0.0292974094 0.0024740504 -0.0046051741 0.0075678981 0.0056893176 0.0192314170 -0.0086560417 -0.0152789152 -0.0052736112 -0.0202771468 0.0067177348 0.0060555967 0.0057891090 0.0454475707 0.0230331363 0.0578784150 0.0134547406 -0.0134255852 0.0330965054 -0.0126905869 -0.0135094689 -0.0082220313 0.0077616759 0.0047101364 0.0080896863 0.0406720024 0.0069906145 0.0545919187 0.0057856915 -0.0018217387 0.0106627895 -0.0026881286 -0.0065866737 -0.0012849527 0.0195066458 0.0221817748 -0.0238768863 0.0081671281 0.0097926224 0.0238609741 -0.0080412546 0.0268386439 0.0233690544 0.0059942105 -0.0077640943 -0.0017210112 -0.0068136510 0.0555393830 0.0294955815 -0.0044328071 0.0088976908 0.0092230030 -0.0453876349 0.0236336879 -0.0319550918 -0.0783535559 0.0216061307 -0.0071612102 -0.0717270800 0.0068185227 0.0018036254 0.0580228006 -0.0083966752 -0.0023572741 0.0174766861 -0.1481316433 0.0761479025 -0.0690218749 0.0250821175 -0.0062285040 -0.0315297664 -0.0331307168 -0.0198725323 0.0325928118 0.1370121687 -0.0592068469 0.0357666727 0.0180229996 0.0309287799 -0.0503776864 -0.0262208223 -0.0496188487 -0.0187034968 -0.0040239067 -0.0155528827 0.0097013604 -0.0029870260 0.0114735005 0.0218314683 0.0074499095 -0.0035544481 0.0005760984 0.0011870795 0.0019930898 -0.0014754136 -0.0015867273 0.0002137127 -0.0014561428 -0.0019684835 -0.0035231388 0.0294737239 -0.0251320005 -0.0385596625 -0.0542516638 -0.0388833342 0.0169024598 0.0236334053 0.0244235316 -0.0054491447 -0.0022695526 0.0237569672 0.0116406352 -0.0084154018 -0.0183515488 0.0000941578 -0.0075212993 0.0002706939 0.0045482450 -0.0028171521 -0.0271922175 -0.0085981814 -0.0045371875 0.0099771761 -0.0021214268 -0.0142695752 -0.0073624030 -0.0008725879 -0.0322375541 0.0098430305 0.0236677482 -0.0048414559 0.0544614747 0.0258978067 -0.0009275690 -0.0034527212 -0.0001685253 0.0029266203 -0.0056996919 -0.0033418494 -0.0143394913 0.0068252282 0.0115072887 0.0013547125 0.0017930195 -0.0003156958 0.0037012991 0.0004147128 -0.0015276031 -0.0034441344 -0.0011970100 0.0013317603 -0.0016626477 0.0044443181 0.0014630611 0.0001847250 -0.0041110236 -0.0007468227 -0.0001488185 0.0048736728 0.0007674246 0.0064647866 -0.0082232497 -0.0040815747 -0.0024598853 -0.0025567230 -0.0002804570 -0.0023685382 -0.0032755907 0.0014399084 -0.0013948823 -0.0226273928 -0.0027281136 -0.0136554055 -0.0106833429 0.0042747504 0.0073329056 -0.0174794826 -0.0019402571 -0.0049316031 0.2544122666 0.0257460646 -0.0028290432 0.0128539943 0.0467244215 0.0021826121 0.0009894212 -0.0007709303 -0.0009308389 -0.0006711109 -0.0000701624 0.0000757878 -0.0002885616 0.0000781207 -0.0010130802 0.0011944531 -0.0006646167 0.0039423831 -0.0001767179 -0.0046647828 -0.0095023961 0.0071958094 0.0025103505 -0.0054062786 0.0021043164 -0.0014030374 0.0001707020 0.0002477312 0.0003379053 0.0000247926 0.0000818047 0.0009826817 -0.0622962433 -0.0118366558 -0.0080772765 -0.0237641144 0.0130773675 0.0619197412 0.0327682426 -0.0008076558 0.0094625904 -0.0143443470 0.0081607096 0.0768696356 0.0073255590 -0.0863533294 -0.0943842459 0.1460144660 -0.0219036002 -0.0179443805 -0.0014297072 -0.0063785439 -0.0448880782 0.0048601673 -0.0252743903 0.0558638470 0.0742366918 -0.0019366178 0.0147324994 -0.0047498579 0.0016089677 0.0014605424 -0.0048612812 0.0018167426 -0.0111924482 0.0078462481 -0.0052019569 -0.0065624606 0.0288108904 0.0032384879 0.0275717067 0.0468337334 -0.0174802307 0.0029460045 -0.0332581536 0.0017355567 -0.0142602281 -0.0058241088 0.0141198499 0.0145428138 0.0324862128 -0.0045201335 0.0099641185 -0.0162317364 -0.0066735033 -0.0149208288 -0.1618912998 -0.0102297219 -0.0834345775 -0.0210465038 -0.0179442469 -0.0281104740 -0.0156840453 0.0049263277 0.0037014335 -0.0973590668 0.0008645760 -0.0444695162 -0.0221838167 -0.0025286927 -0.0162985012 -0.0091837825 -0.0125428642 -0.0308073808 0.0328082321 0.0216850192 0.0211098633 -0.0247101305 -0.0024419832 0.0283054258 -0.0270137689 -0.0233022350 -0.0332620399 0.0496107208 0.0302929697 0.0189037613 0.0126711848 -0.0055749041 -0.0409616050 -0.0588914670 -0.0605338764 -0.1148780928 -0.0095824782 -0.0010338721 -0.0013713386 0.0242562244 -0.0053337190 -0.0526078613 -0.0608939034 -0.0669755112 -0.1430140769 0.0061854268 -0.0088380844 -0.0121412006 0.0072708425 0.0022714471 0.0059022452 0.0001711712 0.0008561360 0.0022928717 0.0122999130 0.0000429755 -0.0062582805 0.0082788008 0.0621097066 -0.0246438639 -0.0204449257 0.0115726860 -0.0029757157 0.0705796091 -0.0589381085 0.0116450238 -0.0689157949 0.0412918515 -0.0045601243 -0.2176175515 -0.0445954099 0.0497001749 -0.0063485879 -0.1015863219 0.0400999922 0.1305756146 -0.0161584381 -0.0193534655 -0.0403391877 0.0199945984 -0.0001170342 -0.4054118170 0.0459261218 0.0829599316 -0.1651046224 -0.1444070637 0.0841493656 -0.0205958188 -0.0072589247 -0.0264846553 -0.0088621968 -0.0671385488 0.0453817515 0.0785851685 0.0408979590 0.0943325464 -0.0261432045 -0.0346366529 -0.0139910505 -0.2113903807 -0.0944484259 -0.2841109491 -0.0730137347 0.1135123193 -0.2095562821 0.0524969168 0.0646728269 0.0270138922 -0.0444335119 -0.0367583890 -0.0386238412 -0.1439169611 -0.0077845580 -0.2063655717 0.0029373948 0.0720221784 -0.0537167812 -0.0010174408 -0.0003190413 -0.0007821785 0.0108634083 -0.0017441760 -0.0002051889 0.0014888366 0.0009039866 0.0137486191 -0.0078645694 0.0005115236 0.0013513310 -0.0051665522 0.0033208876 0.0020259618 0.0071522316 -0.0184115116 -0.0141872534 0.0073265857 -0.0196444068 -0.0132610406 0.0365700073 -0.0048456885 0.0028487972 -0.0010495881 -0.0100979376 0.0033267437 0.0222400441 0.0027024950 -0.0037241270 -0.0052024341 0.0047745070 -0.0010519926 -0.0118656519 0.0002367413 0.0010908191 0.0089910794 0.0045389857 -0.0020082482 0.0005958080 0.0001708043 0.0016118173 -0.0001494244 -0.0011284507 -0.0013365323 -0.0010173121 -0.0011504487 -0.0002214341 0.0016900591 0.0026988544 -0.0020149806 0.0047735550 0.0006432368 0.0049811132 0.0008988620 -0.0004794987 -0.0004640190 -0.0004959669 -0.0000063085 0.0000328974 -0.0042615422 -0.0025440961 0.0048092991 0.0050481157 0.0024082943 -0.0055749399 0.0003133553 0.0021290148 -0.0037284526 0.0301147912 -0.0155691748 -0.0434309433 0.0106774136 0.0043559594 -0.0047471033 -0.0025374434 -0.0061451231 -0.0006049958 0.0043148898 -0.0042736996 -0.0053038480 0.0015169096 0.0055224442 0.0007381278 -0.0019760283 0.0008165590 0.0014746258 0.0005197777 0.0056018032 0.0022248086 0.0010115711 0.0004290796 0.0017058346 0.0032969125 -0.0034989424 -0.0013790955 0.0130816647 -0.0054189025 -0.0103248120 0.0019190992 -0.0188925059 -0.0060879682 0.0033414738 0.0045398530 -0.0011877702 -0.0078649433 -0.0036547016 0.0079665266 -0.0140958296 0.0001157153 -0.0006954861 -0.0009514278 -0.0024276488 -0.0004717847 0.0007680675 0.0006407441 -0.0002456417 -0.0003942736 0.0029141766 0.0005790023 0.0018444152 -0.0019751129 -0.0008789489 -0.0032317397 0.0037625880 0.0019143694 0.0004966986 -0.0052441375 -0.0009265983 0.0064376446 -0.0011886110 -0.0038186701 0.0012577058 0.0103978175 -0.0015302229 0.0101844581 -0.0045754308 -0.0046170757 0.0013499342 0.0115253365 0.0008975632 0.0081219646 0.0053369026 -0.0029388482 -0.0027523486 0.0027956194 0.0004026559 0.0018293560 -0.0669026572 -0.0040665897 -0.0028263499 -0.0005765622 0.0045460317 -0.0137484073 0.0053026379 0.0107552147 -0.0054060652 -0.0216046734 -0.0105573599 0.0064383998 0.0079592724 0.0008669791 -0.0042612854 -0.0023167143 0.0026310701 -0.0358564314 -0.0238688864 0.0236733684 -0.0088691234 0.0055098664 -0.0004548946 -0.0070094163 -0.0070848206 0.0073485442 0.0000156119 -0.0003383737 -0.0004304495 -0.0033699352 -0.0085754816 -0.0050479246 0.5100635529 0.3088398348 -0.1102683016 0.1675833666 -0.2008148764 -0.3485653278 -0.1604174696 0.2238813515 0.1396500904 0.0034282798 0.0194213357 0.0776222257 0.0024588707 -0.0590489161 -0.0741156068 0.1253640401 -0.0359638687 -0.0042597383 0.1129533792 0.0842750019 -0.0835119802 -0.0581483131 0.1010952338 -0.0069844686 0.0606951974 -0.0831518114 -0.0133749066 0.0323870166 0.0334669726 0.0563308104 0.0098844207 0.0232939509 0.0246846893 -0.0062914218 0.0725242728 -0.0016363785 0.0006596778 0.0036239640 0.0017453785 0.0010073613 -0.0017660445 -0.0009781029 -0.0023964118 0.0008026908 0.0000453375 0.0016736603 0.0014642790 0.0023611298 0.0011379399 -0.0015923032 -0.0011262305 -0.0027452068 0.0006106715 -0.0002656319 0.0007530288 -0.0006441880 -0.0028356424 0.0037371731 -0.0042395643 -0.0043336712 -0.0012842085 0.0002234966 -0.0000991669 -0.0014226182 -0.0014932930 -0.0028220722 0.0046094119 -0.0052476885 -0.0057428634 -0.0055707485 -0.0036600132 -0.0030305302 0.0062168475 0.0035302680 0.0013403277 -0.0012045028 0.0004731844 0.0031492313 -0.0066668183 -0.0041430568 -0.0025730004 0.0071234806 0.0043878773 0.0022851523 0.0181802036 0.0060124225 -0.0092632389 0.0006039653 -0.0128137733 -0.0118519963 -0.0022439536 0.0001433746 0.0007483346 0.0105884684 0.0029996262 -0.0075310708 -0.0046200117 -0.0065895798 -0.0155510970 0.0003914293 -0.0004327419 -0.0006446635 0.0002985415 0.0001202246 0.0003470930 0.0000934466 -0.0001782989 -0.0001898282 0.0020619755 -0.0000968807 -0.0010451111 0.0034766098 -0.0049798950 0.0015586703 0.0012031641 0.0057179849 -0.0026035376 0.0087009970 -0.0030039179 -0.0002030923 -0.0066359058 0.0027384817 0.0000548683 -0.0166027081 -0.0016621334 0.0028157288 -0.0050732852 -0.0024864138 0.0016933060 0.0107765669 -0.0011224280 -0.0016256266 -0.0036983138 0.0012931585 0.0001961812 -0.0265502433 0.0032554451 0.0052870143 -0.0133472346 -0.0111006764 0.0063706661 0.0005099074 0.0002955038 0.0006845680 -0.0009037365 0.0002361106 -0.0014148206 0.0011905589 -0.0005905973 0.0022819598 -0.0012317382 0.0003137218 -0.0021374740 -0.0028339287 -0.0024538943 -0.0023933336 -0.0003523493 -0.0032645240 0.0014760986 0.0024039513 0.0007244900 0.0030072722 -0.0003574590 0.0004645294 -0.0008829702 -0.0065445338 -0.0029039719 -0.0072760915 -0.0038291815 -0.0065332685 -0.0009125942 0.0088013372 -0.0004885593 0.0057553977 -0.0925626412 0.0364295252 -0.0176697337 -0.0198249134 -0.0299339054 -0.0907097359 0.0374782530 0.0196717806 0.0113223833 0.0104116277 -0.0280224248 -0.0082822449 0.0695739774 0.2930138570 0.0709185314 0.1208632654 -0.0046097995 0.1406641857 -0.2305567910 0.1055118146 -0.1262168577 -0.0000678090 -0.0030910946 0.0011568250 0.0063660815 0.0010572719 -0.0009527536 -0.0011048342 0.0015397262 -0.0003794016 -0.0028798689 0.0012484469 -0.0003358073 0.0028123883 0.0007027668 -0.0004153420 0.0002261716 -0.0001046091 0.0006584408 -0.0001018211 -0.0008645237 0.0000241647 -0.0004856800 -0.0000413361 -0.0006976997 0.0007591096 0.0003259592 0.0005719323 0.0005684425 0.0004102368 0.0002437598 -0.0001884801 0.0002257278 -0.0003781258 -0.0003379182 0.0001161568 0.0000610515 -0.0005950893 -0.0006677128 0.0007582486 0.0007318871 0.0005901102 -0.0007600389 0.0000737975 0.0007479758 -0.0006439140 -0.0179283113 0.0059983378 0.0128060874 0.0100169636 0.0091879408 -0.0025283973 -0.0042271303 -0.0028332453 0.0015386334 0.0005264704 -0.0027845119 -0.0012715619 0.0011874597 0.0002261570 -0.0008419411 0.0015829161 0.0012720928 -0.0005469584 0.0007314479 0.0014227619 0.0002297474 0.0017834504 -0.0003330982 -0.0000189857 0.0016521511 0.0082230824 0.0026039818 0.0022521333 0.0014731762 -0.0016678048 0.0010966967 -0.0043593866 -0.0007012742 -0.0045345447 -0.0021153703 0.0027708344 0.0026433468 0.0064547498 -0.0003778656 0.0256777473 -0.0105171086 -0.0312794784 0.0048752299 0.0005322619 -0.0018639819 0.0016217912 0.0008269021 -0.0006369546 0.0004892102 -0.0026290798 -0.0007753940 -0.0025728179 0.0013540995 0.0013447106 0.0024938155 -0.0030143492 -0.0014916652 -0.0022038535 0.0027936213 0.0012528910 -0.0143241506 0.0064618039 0.0096082096 -0.0031485844 -0.0028789250 0.0004839524 -0.0064362054 0.0021376019 0.0029104660 -0.0029347725 -0.0079394994 0.0009234248 -0.0114074683 -0.0072285082 0.0042032374 -0.0013485665 0.0020526630 0.0003139576 0.0002271968 -0.0356985402 -0.0017057328 0.0001950882 0.0001827293 0.0007181359 -0.0058355801 0.0066002367 -0.0100782077 0.0043014013 0.0042738246 0.0014029179 -0.0024784421 -0.0024479129 -0.0005823295 -0.0006040923 -0.0001663197 0.0011145773 -0.0045839556 -0.0018000522 0.0043174623 0.0001711189 0.0017596526 -0.0000659907 0.0003571918 -0.0011079975 0.0010474869 -0.0002603101 0.0001505061 0.0020670044 0.0052169310 0.0030774496 0.0122897165 0.0776589480 0.0301747066 -0.0034299565 0.0270814934 -0.0231313008 -0.0622804560 -0.0329390737 0.0191037814 0.0053500895 -0.0131466493 -0.0074525794 0.0044516384 0.0054334077 -0.0178694609 -0.0050007309 0.0095950843 0.0040057152 -0.0050336443 0.0143654615 0.0112881479 -0.0034394729 -0.0083231774 0.0177425221 -0.0092400577 -0.0051155790 -0.0111663693 -0.0048373850 -0.0936117732 0.0030047673 -0.0143402993 -0.0487184860 0.0349477778 -0.1217845803 0.0697212885 -0.0862711780 -0.0509559782 -0.0013036130 0.0009221733 -0.0002731996 0.0009392022 -0.0002292901 0.0002981751 -0.0013502781 0.0009014875 0.0005189345 0.0090891168 -0.0030133241 -0.0007256384 -0.0017144766 0.0001069042 -0.0004258545 0.0004749295 -0.0003388669 -0.0002376528 -0.0021245359 0.0005696854 -0.0015972819 0.0026412648 -0.0027840456 -0.0022066948 -0.0396713300 0.0115699440 0.0053553151 0.0046074574 0.0004435623 0.0018426972 -0.0017575439 0.0022665145 0.0011197108 -0.0011376585 -0.0005120092 0.0000740797 0.0010840795 0.0004088095 0.0000745707 -0.0034856941 -0.0018392902 -0.0012451524 -0.0006699168 -0.0002405694 0.0003018094 0.0003465572 0.0000284103 -0.0006129717 0.0052724987 0.0023899723 -0.0015579445 0.0011435618 -0.0029137582 -0.0014398666 0.0169630841 0.0081448867 0.0046911920 0.0007507593 0.0000058410 0.0001407955 0.0019221281 0.0014148427 0.0014567350 0.0100589741 -0.0143772613 -0.0195767696 0.0195049241 0.0057897496 0.0155001156 -0.0014566125 -0.0059731628 -0.0096147741 -0.0110647127 -0.0001710012 0.0061502222 0.0012305951 -0.0013328492 0.0003284482 -0.0001542699 0.0011557282 -0.0004578140 0.0012968510 -0.0006122385 0.0000331349 -0.0015210428 0.0008649960 -0.0000709396 -0.0013766267 -0.0005573175 0.0003847224 -0.0002291996 -0.0019552910 0.0008169624 0.0018162461 -0.0004427990 -0.0001862880 -0.0001776655 0.0004714077 -0.0001399458 -0.0050661922 0.0003232250 0.0012422851 -0.0029519039 -0.0033666121 0.0017509611 0.0005782895 0.0002495278 0.0007265662 -0.0004652301 0.0004030187 -0.0009543492 -0.0004825787 -0.0006794350 -0.0002977221 -0.0002174887 0.0004381932 -0.0006785268 0.0015823475 0.0003609909 0.0028051110 0.0006317781 -0.0026815035 0.0030819152 0.0000984567 -0.0005486101 0.0005744384 0.0006153319 0.0009001767 0.0002317443 -0.0008824325 -0.0010432364 -0.0004120623 -0.0015434769 -0.0035577846 0.0004622947 -0.0315207684 0.0148348637 -0.0372026042 0.5290347841 -0.3014117749 0.1762169581 0.1596220102 0.2277986948 0.5288841750 -0.2607886366 -0.1930378222 -0.1261394272 0.0068399342 -0.0104804853 0.0099822811 -0.0311534258 0.0865631599 0.0666877630 -0.0157367229 -0.0606024243 -0.0846286017 -0.0322872046 0.0954563199 -0.1260873907 0.0006549315 0.0110467660 -0.0044968788 -0.0142429855 -0.0077144140 0.0034322223 -0.0027201089 -0.0076992285 0.0025531700 0.0010279845 -0.0143603140 0.0068197648 -0.0026776261 0.0056582784 -0.0016148810 -0.0012344412 0.0002943310 -0.0027397441 0.0033583931 0.0108742004 -0.0038027653 0.0044138142 0.0017660028 0.0045287008 -0.0054743325 -0.0034366118 -0.0036153256 -0.0053436097 -0.0020979071 -0.0047106415 0.0004926696 -0.0011301436 0.0011513540 -0.0018011876 -0.0039960134 -0.0001996042 0.0026064004 0.0028452957 -0.0004767629 -0.0034618660 -0.0021667708 0.0021151118 -0.0019577268 -0.0032723238 -0.0004159358 -0.0250835003 0.0108769026 0.0322665153 -0.0520876910 -0.0337318876 0.0182461973 0.0164975156 0.0219497925 -0.0020710900 -0.0039146435 0.0243305178 0.0132411508 -0.0074097140 -0.0120893729 0.0010987348 0.0007821113 -0.0057321337 -0.0029746023 -0.0049070818 -0.0176501322 -0.0035211930 -0.0040828833 -0.0024449646 -0.0040422907 -0.0116727687 -0.0087641652 0.0002930054 -0.0407160239 0.0098230562 0.0319140199 -0.0059436325 0.0340305168 0.0213874273 0.0049250674 -0.0128679598 -0.0095592808 0.0100795372 0.0044920363 -0.0026148387 -0.0134449636 0.0236055600 -0.0008114931 -0.0259678241 -0.0129314877 0.0098525672 -0.0254621862 -0.0182830446 0.0081074185 0.0040785424 0.0156136486 0.0005792958 0.0159247970 -0.0112168679 -0.0095319473 -0.0100482535 0.0220519771 0.0077945785 0.0164396062 -0.0066814721 -0.0079502029 0.0405102574 -0.0038724591 -0.0173648710 0.0228606506 -0.0114938732 -0.0025238041 0.0274553486 0.0043607943 -0.0103639825 0.0225038118 0.0535401664 -0.0006560684 0.0970228071 0.0560892070 -0.0327187028 0.0073080739 -0.0088619771 -0.0011583003 -0.0104438971 0.1852825737 0.0283208991 -0.0013608232 -0.0006315617 -0.0011390079 -0.0027265410 0.0074425760 -0.0031120067 0.0013746148 -0.0052658441 -0.0032505819 -0.0021238775 -0.0001816527 0.0003569176 0.0009716521 -0.0001712307 -0.0007787946 -0.0038664585 -0.0018129795 0.0037049564 -0.0035820120 -0.0093912715 0.0044243724 0.0017085814 -0.0016656435 0.0018416066 0.0007667874 0.0014762037 0.0011869414 0.0059521156 -0.0016455931 0.0041120093 0.0567640496 0.0278761772 -0.0061842232 0.0197068662 -0.0174249414 -0.0458705953 -0.0220966915 0.0154439589 0.0067317810 0.0719253591 0.0455286921 -0.0063451456 -0.0316737139 0.0746203163 -0.0301016770 0.0107462831 -0.0119376978 0.0025727774 0.0098912795 0.0099475701 0.0152395361 -0.0065298279 0.0194190775 -0.0282355232 -0.0297754186 -0.0036900798 -0.0064558174 -0.0931938376 0.0047584206 -0.0125832943 -0.0133140405 0.0656033036 -0.0459896746 0.0096897007 -0.0604108239 -0.0017157126 0.0153922506 -0.0039743993 0.0037076898 -0.0147114811 0.0016819935 -0.0050842580 0.0166452418 -0.0112832887 -0.0059047131 -0.1094221468 0.0397457344 0.0128680022 0.0167610811 -0.0026804439 0.0019665073 -0.0060393237 0.0034927818 0.0028888451 0.0488810886 -0.0042577571 0.0224914522 -0.0294019668 0.0356622559 0.0240848623 0.4916296318 -0.1441702215 -0.0679552784 -0.0482782789 -0.0075469252 -0.0213537075 0.0286304697 -0.0327815104 -0.0192806632 0.0039638521 0.0014011193 -0.0018269766 -0.0010852202 0.0004531851 0.0021697986 0.0072629050 0.0038965767 0.0023215652 0.0000179649 -0.0009261067 -0.0026723878 0.0029265753 0.0029774808 0.0054237616 -0.0142576975 -0.0066467234 0.0022546565 -0.0035733450 -0.0084380644 -0.0023906032 -0.0446983176 -0.0225070419 -0.0144588387 -0.0064902717 -0.0031851781 -0.0020979908 -0.0113729196 -0.0089802520 -0.0141118885 -0.1247333344 0.1785296388 0.2431366392 -0.2418484205 -0.0716844446 -0.1918121167 0.0039314493 0.0167210073 0.0271134151 0.0298389643 0.0001846116 -0.0162615601 -0.0046740210 0.0048421255 -0.0008021692 0.0034481198 0.0007868265 -0.0009308368 0.0052020215 -0.0002643752 -0.0007106941 0.0015825260 -0.0041894188 0.0012698166 -0.0238261148 0.0023808824 0.0030572728 -0.0094178137 0.0154903110 -0.0043476031 0.0045983117 0.0009291377 -0.0011574480 -0.0049891714 -0.0001824872 0.0009781667 -0.0069312411 0.0026653766 -0.0000201921 -0.0008233489 0.0075442994 -0.0023345747 -0.0036188279 -0.0021842926 -0.0037278305 0.0001071753 -0.0050847791 0.0044344621 0.0059249331 0.0044487070 0.0061972047 -0.0006630571 -0.0022572828 0.0007309695 -0.0163512167 -0.0062394576 -0.0244692482 -0.0052643645 0.0135836891 -0.0192927940 0.0030116337 0.0055607640 0.0000967740 -0.0048524294 -0.0062453741 -0.0024519756 -0.0038901780 0.0035993559 -0.0088496137 0.0060737977 0.0168189286 -0.0042453110 -0.0168915775 0.0047023086 -0.0259648337 0.3256624545 -0.1432961206 0.0715040654 0.0903516084 0.1066766483 0.3637675677 -0.1954466009 -0.0688471676 -0.0345181075 0.0050674142 -0.0102231744 0.0072592215 -0.0232954820 0.0955164819 0.0616790891 -0.0023963716 -0.0552428540 -0.0626221059 -0.0341475020 0.0872100502 -0.1153511102 -0.0001496271 0.0010726075 -0.0003556962 -0.0025563914 -0.0001421242 0.0003384637 0.0007368036 -0.0004128366 0.0000597282 0.0013352161 -0.0001699571 -0.0000705967 -0.0013441218 -0.0005672222 0.0002912756 -0.0002858459 0.0001007141 -0.0005378855 0.0002009734 0.0002029904 0.0003488205 0.0002485309 0.0001436732 0.0001931310 -0.0002965940 -0.0003890914 0.0000739027 -0.0006887654 -0.0001743733 -0.0006718421 0.0000714172 -0.0000509517 0.0001668698 0.0002780917 0.0001520325 -0.0000920366 0.0001496975 0.0000135781 0.0000346379 -0.0001198708 -0.0000148221 0.0000115109 -0.0001004639 -0.0000253444 -0.0001084597 -0.0001949545 0.0006241399 0.0012645528 -0.0024432764 -0.0018131662 0.0007956674 0.0007520201 0.0008442581 -0.0001689884 0.0001664865 0.0007137922 0.0000889418 -0.0003332448 -0.0001438116 0.0001837949 0.0000574726 -0.0003516570 -0.0001555918 -0.0002843223 -0.0005719415 0.0000118986 -0.0003593682 -0.0004349626 -0.0000869139 -0.0004332728 -0.0013380230 -0.0002761987 -0.0018135282 0.0003269024 0.0013527418 -0.0009267534 0.0015094118 -0.0002130264 0.0005589613 0.0000446789 -0.0002086458 -0.0015875294 -0.0006324699 -0.0006463888 0.0026805816 -0.0043457519 0.0057875956 0.0028510116 0.0034854916 -0.0003948072 0.0031335598 0.0030132290 -0.0013236364 0.0010793640 -0.0037729725 -0.0014347046 -0.0031192189 0.0018235603 0.0018206998 0.0035127368 -0.0057076686 -0.0019877494 -0.0024206569 0.0032980940 0.0011163673 -0.0074206368 0.0011742975 0.0052505200 -0.0044088626 -0.0037931779 0.0005900180 -0.0196055074 0.0083156230 0.0084516428 -0.0026150341 -0.0092583727 0.0033925923 -0.0191269250 -0.0110552090 0.0084670529 0.0002727143 -0.0001095843 -0.0000077742 -0.0002390922 0.0046609923 0.0001515338 0.0001495015 0.0000810532 -0.0002474194 0.0014710689 -0.0066497886 -0.0009206050 -0.0093061094 0.0037157346 0.0076286142 0.0017908154 0.0016599131 -0.0001780133 0.0005119903 -0.0004183440 0.0003667082 -0.0000258664 -0.0000587352 -0.0000554015 0.0005406976 -0.0007864880 -0.0003094078 0.0026074877 -0.0023715625 0.0021372375 0.0108259112 -0.0076258762 0.0053804156 0.0231293733 -0.0261312492 0.0375895652 -0.0006391416 -0.0005742046 0.0002519921 -0.0004874645 0.0014918239 -0.0009747554 -0.0012515461 -0.0002979687 -0.0008032706 0.0038454673 0.0009292001 -0.0083393304 -0.0014211639 0.0098231353 0.0101960082 -0.0141374045 0.0011577081 0.0023755043 0.0152245449 0.0148350321 0.0198213418 -0.0099789744 0.0284935013 -0.0408219755 -0.0439662198 -0.0097627242 -0.0115761023 -0.4749213210 0.1890722090 0.1730876218 -0.1920352386 0.4091101049 -0.5214685468 0.2948234336 -0.1868032085 -0.2312979842 0.0000449856 -0.0003021868 -0.0000319178 -0.0000188928 0.0001221265 0.0000847838 0.0001970325 -0.0001514174 -0.0001037302 -0.0003950262 0.0000195842 -0.0000995044 -0.0000230492 0.0001496801 0.0001325330 0.0002615754 -0.0001412535 -0.0000664697 -0.0003169836 0.0000714849 0.0000673289 -0.0005889313 0.0005783584 0.0004066600 0.0010934368 -0.0002167450 -0.0000588526 -0.0003215215 0.0000851502 0.0001505489 -0.0005965158 0.0005372819 0.0005495669 0.0003354839 0.0001856839 0.0000852210 -0.0003111233 -0.0001370456 0.0000424910 0.0002193891 0.0000660961 -0.0000761480 0.0002575775 0.0001378765 0.0000130273 -0.0002072080 -0.0001021057 0.0000620025 -0.0011167501 -0.0004005978 0.0004490288 -0.0003418344 0.0004755113 0.0002706880 -0.0009540786 -0.0005259466 -0.0003213660 -0.0005193395 -0.0002196610 0.0002256877 -0.0001110412 0.0000560656 0.0002669710 -0.0002342078 0.0003240287 0.0004847586 -0.0004986624 -0.0001733362 -0.0004408071 0.0000912839 0.0003836198 0.0005999260 0.0006035432 0.0000321405 -0.0003455899 -0.0002971284 0.0005217532 -0.0001677313 -0.0001678238 -0.0005596450 0.0002651654 -0.0008238002 0.0002071112 0.0000491452 0.0005518915 -0.0001477997 -0.0000362104 0.0015824215 0.0000627432 -0.0002355829 0.0006197207 -0.0000751718 -0.0000674730 -0.0009176046 0.0001073722 0.0001354996 0.0003258361 -0.0001454353 -0.0000063165 0.0021928738 -0.0002788184 -0.0004849591 0.0011490402 0.0009032563 -0.0005166645 -0.0000938840 0.0000993346 -0.0002556534 0.0000725260 -0.0001584115 0.0002436653 -0.0001908274 0.0000398864 -0.0003249954 0.0001895109 -0.0000279789 0.0003207972 0.0002976134 0.0002662232 0.0002338356 0.0001033124 0.0004170312 -0.0001560214 -0.0003212576 -0.0000693355 -0.0004248439 0.0000310969 -0.0000898071 0.0001216619 0.0008244815 0.0003951613 0.0008633905 0.0005827567 0.0009829092 0.0001024176 0.0031012854 0.0019752010 0.0113161628 -0.1054870064 0.0204294073 0.0010405338 -0.0259082206 -0.0119408488 -0.1504245722 0.0950673030 -0.0109275234 -0.0187599943 -0.0015051274 0.0018560638 -0.0023961877 0.0079294982 -0.0082467537 -0.0112850730 0.0085900969 0.0122970930 0.0228554688 -0.0046015603 -0.0163852797 0.0234806942 -0.0059567753 0.0081083014 -0.0025267303 -0.0196182007 -0.0004196508 0.0024193971 0.0080812104 -0.0030119112 0.0001613178 0.0083652810 -0.0107010072 0.0057119277 -0.0095431960 -0.0026040216 0.0014101039 -0.0020637700 -0.0065018582 0.0032439408 -0.0006747807 0.0115353528 -0.0092526467 -0.0022233848 0.0035381188 -0.0081665529 -0.0000359943 -0.0058159295 0.0066498321 0.0002742927 0.0062591586 -0.0047619788 -0.0014687093 0.0027301594 -0.0022033194 0.0021119761 0.0012663160 -0.0009635074 0.0009725564 -0.0021886583 0.0046539334 0.0006637577 0.0020214062 -0.0021792762 -0.0025023003 0.0012417440 -0.0063627097 0.0098789686 -0.0071700306 -0.0103997534 -0.0239983520 -0.0225238197 0.0073101165 0.0109544327 0.0081647875 -0.0043985454 0.0036438285 0.0092664881 0.0007789279 -0.0059479604 0.0058056159 0.0052369463 0.0001758568 -0.0068111397 -0.0011777299 -0.0042770039 0.0002508919 0.0035028019 -0.0016788650 -0.0081576655 -0.0032821721 -0.0037676394 -0.0376320394 -0.0064464208 -0.0317634046 0.0080555053 -0.0040278383 -0.0086740327 -0.0052017462 -0.0046525505 0.0027251188 -0.0020025274 -0.0027243189 -0.0031470287 -0.0004127998 0.0015186630 -0.0175392096 0.0094427478 0.0175319612 0.0003217884 0.0009284996 0.0002454819 0.0023047499 0.0021086994 -0.0006754997 0.0007502324 -0.0032863913 -0.0010192300 -0.0018835889 -0.0004568983 0.0005368837 0.0023638922 -0.0032561597 -0.0014750661 -0.0013964409 0.0034329734 0.0012247138 0.0052587691 -0.0064782520 0.0014387029 -0.0013055013 0.0054579143 0.0036722093 -0.0172198131 0.0094903924 0.0086091907 -0.0026423501 -0.0079537716 -0.0011800394 -0.0120752020 -0.0066612079 0.0045877129 0.0033164130 -0.0026448853 -0.0004952019 -0.0085503767 0.0540121104 0.0134788298 0.0146504391 0.0096603207 0.0097719569 -0.0115646279 0.0014389155 0.0079145091 -0.0065794079 0.0146832603 0.0114215873 -0.0049835148 -0.0037242041 -0.0004555053 0.0013959278 -0.0002641556 -0.0004560579 0.0029616959 0.0028187716 -0.0034734221 -0.0030038562 0.0011369606 0.0008479622 -0.0019713831 0.0004491662 -0.0002145773 0.0118733074 -0.0097070421 -0.0126919052 0.0078511209 -0.0097124924 -0.0171677597 -0.0581801047 -0.0293643322 0.0097046033 -0.0182976837 0.0165179030 0.0413733954 0.0219806801 -0.0202744115 -0.0108396237 0.0069689994 0.0089522333 0.0158627635 -0.0020068352 -0.0110694063 -0.0241494937 0.0354152648 -0.0095159954 -0.0015009730 0.0036337522 0.0031008783 -0.0080788996 -0.0003892698 -0.0032651506 0.0109635820 0.0178258122 -0.0012111929 0.0032249033 -0.0645373459 0.0196363054 0.0068395844 0.0844986588 0.1347428027 0.1630162145 -0.1501648223 0.0408052247 0.1287180964 0.0018348038 -0.0020397798 0.0005123523 0.0010448437 0.0008007443 0.0012883094 0.0023797658 -0.0027303493 -0.0021707377 -0.0143410768 0.0044406347 0.0004899642 0.0017509005 0.0016296855 0.0022811790 0.0027499091 -0.0026641231 -0.0014931208 -0.0045162265 0.0006056355 -0.0003128385 -0.0108917719 0.0098414921 0.0058009530 0.0519390373 -0.0156779727 -0.0079647199 -0.0113823236 0.0015258184 -0.0020819816 -0.0052296110 0.0047733894 0.0032554046 -0.0091606168 -0.0018492868 0.0061132059 0.0060069022 -0.0003197931 -0.0009062195 -0.0805712660 -0.0437082473 -0.0279811226 0.0029269782 0.0039240357 0.0052942585 -0.0053720610 -0.0077159039 -0.0171306221 0.0627994069 0.0279246908 -0.0098029106 -0.0040587902 0.0082704504 -0.0153863348 0.3807415312 0.1933772232 0.1268510255 -0.0012428851 -0.0069395652 0.0123441090 0.0451666146 0.0398346544 0.0532050683 -0.0132762066 0.0188277605 0.0256148109 -0.0248559988 -0.0072780361 -0.0194430959 -0.0340833101 -0.1410840054 -0.2278788014 -0.2488784594 -0.0024174720 0.1341049646 -0.0015226436 0.0066938897 -0.0023987593 -0.0031610205 -0.0015651076 0.0008398052 0.0008628685 -0.0029477349 0.0010055120 -0.0020764182 0.0030588333 -0.0008342683 -0.0045188038 -0.0030458413 0.0019544296 0.0036326462 -0.0085696290 0.0027728844 0.0036567291 -0.0007309596 -0.0005111938 -0.0006366411 -0.0000727976 0.0001249573 -0.0146653276 0.0014000974 0.0037734173 -0.0038273127 -0.0044272748 0.0024803188 0.0045074241 0.0004617034 0.0065342421 -0.0058855484 -0.0028772452 -0.0051541676 0.0033992075 -0.0013930294 0.0064924049 -0.0050118930 -0.0003271344 -0.0076089325 -0.0057448698 -0.0061850353 -0.0037185270 -0.0019888747 -0.0143352028 0.0072982586 0.0059862114 0.0003886933 0.0085771160 0.0027287178 0.0071432478 -0.0014499309 -0.0233546536 -0.0118430982 -0.0246019114 -0.0166475432 -0.0316326234 -0.0006875164 -0.0078245566 0.0231112874 0.0255057737 -0.1346196268 -0.2135528020 0.2039807513 0.0176041192 0.1626826186 -0.3579744876 0.2745173534 -0.2744759542 -0.2450154797 -0.0055153212 -0.0045015775 -0.0051656670 0.0723214975 0.0626531171 -0.0280864557 0.0796498209 -0.0067606996 0.0845435544 -0.0235235885 -0.0037897130 -0.0034261830 0.0003283079 -0.0025073815 0.0007321292 0.0063737701 -0.0000125661 -0.0007710431 -0.0018151212 0.0007164865 -0.0000286964 -0.0035439196 -0.0007558003 0.0010895130 0.0038777301 0.0018387108 -0.0009498874 0.0010143863 -0.0016064693 0.0030312023 -0.0014214931 0.0006034795 -0.0031772237 -0.0016643894 -0.0001236102 -0.0023346569 0.0018126056 0.0012291720 0.0009470725 0.0037044914 0.0019809889 0.0026882647 -0.0006229135 0.0007191399 -0.0010057422 -0.0010949227 -0.0004704924 0.0003053024 -0.0002334929 -0.0003782100 0.0001120599 0.0001815024 0.0003193179 -0.0003747934 0.0002678873 0.0000910763 0.0001385166 0.0209881838 -0.0138982430 -0.0223647132 0.0108490235 0.0040946163 -0.0046932676 -0.0002554635 -0.0043735582 -0.0014208285 0.0001807722 -0.0068313885 -0.0028992005 0.0009339657 0.0023838679 0.0001355798 -0.0034478345 0.0023006232 0.0033262724 0.0013887231 0.0035186582 -0.0002947176 0.0009718261 0.0038912560 0.0008945119 0.0019106553 -0.0030594711 -0.0015901155 0.0129103205 -0.0036750653 -0.0139274618 0.0053580124 -0.0034014951 0.0019727908 -0.0039869255 0.0043023547 0.0041521366 0.0019008188 -0.0032069210 0.0017841119 -0.0001184529 -0.0002326053 -0.0154478115 -0.0032442158 -0.0037992374 -0.0002604679 -0.0039896365 -0.0041244935 0.0011070350 -0.0016565303 0.0063017822 0.0020789592 0.0046519180 -0.0009166232 -0.0020274824 -0.0054190905 0.0071448662 0.0033782776 0.0034927442 -0.0055444732 -0.0024457520 0.0016824298 0.0047144531 -0.0070619541 0.0048997533 -0.0003255047 -0.0035567124 0.0266024515 -0.0129138213 -0.0128716891 0.0056383570 0.0137399818 0.0010337205 0.0245571389 0.0132465188 -0.0090306700 -0.0007650262 -0.0014122793 -0.0002737723 0.0011533165 -0.0060113689 -0.0026048261 0.0012212974 0.0010178397 0.0024982527 0.0185351011 0.0092075813 -0.0108123085 0.0010944376 -0.0275953432 -0.0173007702 0.0072847788 0.0063855210 0.0007937528 -0.0003795672 0.0000106067 0.0002170912 -0.0083874470 -0.0046121755 0.0034528274 -0.0007998425 -0.0004348718 -0.0006088603 0.0010608722 -0.0004994958 0.0004720491 -0.0127439218 0.0112155071 0.0142046447 -0.0113765029 0.0066096988 0.0174365216 0.1023249222 0.0610504666 -0.0221389340 0.0299094133 -0.0437044010 -0.0570579843 -0.0168202810 0.0452458678 0.0345276719 0.0045809495 0.0036222672 0.0041814672 -0.0012564054 0.0021547529 0.0029531029 0.0014803727 -0.0053042351 0.0031816930 -0.0002522105 0.0001075639 0.0055399911 -0.0005974420 0.0038477479 -0.0112644356 -0.0136911488 -0.0009170931 -0.0028423469 0.0960578200 -0.0051990650 0.0231422112 -0.0927222405 -0.1444315806 -0.1748098521 0.1720042616 -0.0055852516 -0.1512786781 0.0002348885 0.0009420737 0.0004456068 0.0002097588 -0.0004854805 -0.0003416679 -0.0006229868 0.0002202581 -0.0000200446 -0.0003552706 0.0006666611 0.0007316574 0.0004987281 -0.0005368914 -0.0003425753 -0.0009775963 0.0004220635 0.0000768733 0.0000567165 -0.0003909132 -0.0006379535 0.0011501540 -0.0015251803 -0.0011394605 0.0036290551 -0.0009891307 -0.0003047781 -0.0003501305 -0.0004940401 -0.0009379891 0.0019089304 -0.0021955149 -0.0018860957 -0.0026458969 -0.0010293201 0.0004042893 0.0017350396 0.0003087001 -0.0004812239 -0.0112801984 -0.0058643571 -0.0028153179 -0.0005836596 0.0000859792 0.0005992745 -0.0000983101 -0.0008820892 -0.0029669344 0.0138855334 0.0047754552 -0.0031205218 -0.0020900123 0.0059801193 -0.0038553267 0.0535567372 0.0275056091 0.0182020319 0.0031887838 0.0006033310 0.0004469438 0.0070424174 0.0053267991 0.0065552264 -0.0008921341 0.0012325524 0.0016643142 -0.0019572505 -0.0005541425 -0.0015196155 -0.0048538020 -0.0201079265 -0.0324555689 -0.0350393165 -0.0003718832 0.0188533045 0.0003037822 -0.0007732411 0.0002804032 0.0003317429 0.0015768496 -0.0008037140 0.0031455732 -0.0008376322 -0.0001660068 -0.0018314115 0.0004354883 0.0001384502 -0.0069433104 -0.0001965474 0.0010291781 -0.0023964340 0.0007360902 0.0000962054 0.0035084523 -0.0003100903 -0.0005324257 -0.0014223169 0.0004105567 0.0001031817 -0.0084243676 0.0010421386 0.0016134717 -0.0039097750 -0.0026152414 0.0016285547 0.0013983238 -0.0002090829 0.0024500189 -0.0014224676 0.0002716144 -0.0021888691 0.0012252540 -0.0005296212 0.0023631087 -0.0016820635 0.0000997837 -0.0027090723 -0.0019491226 -0.0022106762 -0.0013140760 -0.0006062104 -0.0046756246 0.0023665984 0.0022971997 0.0001486922 0.0033206791 0.0005207938 0.0018597396 -0.0006563408 -0.0073360196 -0.0039236706 -0.0076478070 -0.0054982246 -0.0102853953 -0.0004387001 0.0153969930 -0.0326829288 -0.0250596753 0.0723837964 0.3173844436 -0.2836862515 -0.0510797489 -0.2488126233 0.3649140448 -0.3166893009 0.3717023697 0.3288320323 -0.0085806034 0.0177141326 -0.0033268163 0.0049289413 -0.1899112004 -0.0878508626 -0.0521844810 0.0763645315 0.0338431298 0.0857386093 -0.1257103910 0.1653910031 0.0591431996 -0.1138091720 0.0329560943 0.3022788581 -0.0117653493 -0.0289450223 -0.1085842490 0.0266727917 0.0028236949 -0.1629697899 0.0156660566 0.0182383463 0.1856764257 0.0840835102 -0.0427667088 0.0608666963 -0.0376769107 0.1223728373 -0.0646406742 -0.0315620352 -0.0938655147 -0.0614144021 -0.0246401165 -0.0574260345 0.0780316598 0.0867379313 0.0075942132 0.1647129838 0.0575507058 0.1547171207 -0.0234749479 0.0179727806 -0.0388615791 -0.0562342766 -0.0326738412 0.0138333669 -0.0070687879 -0.0028053868 -0.0060353563 0.0096050227 0.0057623149 -0.0038559441 0.0056721963 -0.0033363181 0.0142097641 -0.0044361734 0.0053543885 0.0089663591 0.0116285042 0.0151397678 -0.0027614432 -0.0054068552 -0.0007835567 0.0031506362 -0.0060105941 -0.0036410451 0.0027871645 0.0011755064 -0.0058903191 -0.0024945204 0.0040968611 0.0024383894 -0.0016924398 0.0015920853 -0.0018265326 -0.0016246569 0.0033485017 0.0026014548 -0.0011929040 -0.0013801001 0.0202706839 0.0036000768 -0.0028277398 0.0062580858 0.0040940673 0.0014650930 0.0157693663 0.0051704315 -0.0018556494 0.0026670370 0.0024794801 0.0056057114 -0.0053176034 -0.0047664246 -0.0134052543 0.0089144168 0.0107939309 0.0032215548 0.0045060833 -0.0010194948 0.0031621075 0.0009168434 -0.0012191358 -0.0015896145 -0.0043203026 0.0000811190 -0.0027858432 0.0040774594 0.0019101007 0.0017360602 -0.0055633154 -0.0015197347 -0.0013657238 0.0072186919 0.0015918588 -0.0027181113 -0.0047674241 0.0003434780 -0.0045071482 -0.0173927486 -0.0021192983 -0.0122507303 0.0024907759 0.0055867950 -0.0030922871 -0.0219629348 -0.0019694137 -0.0171823468 -0.0117970550 0.0055766975 -0.0025530992 0.0006515022 0.0008356366 0.0117183699 -0.0027438665 -0.0201622473 -0.0183426891 -0.0141312392 0.0274088587 -0.0016230740 0.0007386539 0.0034141371 0.0012470754 -0.0009392846 -0.0010852262 0.0002593270 0.0001560112 0.0000398453 0.0014272058 -0.0002074857 0.0001956501 0.0089954324 0.0094885183 -0.0057477425 0.0060451456 -0.0107679595 -0.0028900106 0.0015660895 0.0006556697 -0.0014187944 -0.0017111147 -0.0005754375 0.0007168447 -0.0040694811 -0.0008612642 0.0024291678 -0.1290281907 -0.1043622937 0.0475919097 -0.0396069406 0.0531401444 0.0791809005 0.0339774727 -0.0754003093 -0.0536307473 0.0547300606 0.0214793740 -0.0573583455 -0.0237239758 0.1215367155 0.0740434151 -0.1199980332 0.0049946818 0.0212884440 -0.0160136597 -0.0099243673 0.0225232080 0.0078043379 -0.0111013654 -0.0099397916 -0.0225231537 0.0118314751 -0.0014458006 0.0446244924 0.0143361688 0.0317438017 -0.0176285812 -0.0311847352 -0.0305864861 0.0398300010 0.0367763574 -0.0373432400 0.0012477391 0.0337572183 0.0068316894 -0.0207448942 -0.0133814781 -0.0208694400 -0.0176397257 0.0196872705 0.0164420885 0.0337934051 0.0039572998 0.0178680153 -0.0045063599 -0.0233347424 -0.0267413579 -0.0390131747 0.0296294132 0.0155621363 0.0947677196 -0.0090645167 0.0078630937 0.0914850192 -0.0741500481 -0.0530736714 0.0042050281 -0.0004360945 0.0014063678 0.0748473401 -0.0278999991 -0.0034786869 0.1046305152 -0.1058644585 -0.0738155009 -0.0519273625 -0.0256696703 0.0005970547 0.0232388924 0.0036312009 -0.0293596230 0.0167875414 0.0171358827 0.0332435700 -0.0327827857 -0.0126478455 0.0097910203 0.0051609744 -0.0038994398 -0.0319773144 0.1578377498 0.0653531945 -0.0488950702 0.0698332002 0.0318136597 0.0211583528 -0.0054342247 0.0001050980 0.0001648970 0.1289648872 0.0523724997 -0.0263891809 0.0577957457 0.0223946734 0.0285615482 -0.0010130977 0.0016735790 0.0022789248 -0.0078543084 -0.0020343431 -0.0059163853 -0.0008494266 -0.0031175316 -0.0046284934 0.0021317160 -0.0000775820 -0.0008913641 -0.0037999557 -0.0550849575 0.0228015081 0.0406448718 0.0598726346 -0.0338975780 0.1124642279 -0.0066156895 -0.0150201871 -0.0412323836 -0.0139302266 0.0122116793 -0.2484161129 0.0220330953 0.0260605953 -0.1241755143 0.1226038111 -0.0267537810 0.1020954735 -0.0005688581 -0.0179967224 -0.0585956452 0.0084489321 0.0073778833 -0.1979259180 0.0351416111 0.0307590587 -0.0961177362 -0.0251540534 0.0250559715 0.0324693944 -0.0168919361 0.0700259577 -0.0251240706 0.0271706275 -0.0621314449 0.0398465877 -0.0087629874 0.0704177992 -0.0455607945 0.0005312922 -0.0721167572 -0.0646487405 -0.0617878680 -0.0549821534 -0.0247124680 -0.1034234474 0.0374838690 0.0667309356 0.0065049106 0.0949879931 0.0044640538 0.0384206066 -0.0234355434 -0.1867794907 -0.0999082612 -0.1913503983 -0.1438414756 -0.2572769708 -0.0176132714 0.0006539155 0.0008626508 0.0027974218 -0.0282726369 -0.0060090750 0.0088329320 -0.0029545753 0.0059490206 -0.0436697140 0.0297163930 -0.0123454863 -0.0129396142 0.0022145767 -0.0061540399 0.0048277049 -0.0131317050 0.0608359756 0.0381557643 -0.0013974172 -0.0346582701 -0.0417890273 -0.0121607179 0.0561714585 -0.0751806806 0.0033517670 -0.0088376180 0.0026727449 0.0244913415 -0.0006365060 -0.0025699284 -0.0083393636 0.0023402165 0.0001240575 -0.0129019068 0.0006183425 0.0009938912 0.0144392373 0.0064693784 -0.0031820243 0.0003004849 -0.0014956254 0.0020682908 -0.0000758506 0.0005501285 -0.0029424443 -0.0009697576 0.0007813721 -0.0018949651 0.0034274913 0.0014771751 0.0031022775 0.0019838731 0.0020695876 0.0003083368 -0.0010200239 0.0009619229 -0.0011027082 -0.0044076064 -0.0024699581 0.0007634886 -0.0001269191 -0.0007323202 0.0008968758 0.0004125292 0.0003295570 -0.0010721919 -0.0004167886 -0.0001506561 -0.0006280106 -0.0260529150 0.0127366903 0.0331378413 -0.0086300805 -0.0061133574 0.0031368147 0.0029835551 0.0037916475 -0.0005317542 -0.0011555077 0.0036935805 0.0023870182 -0.0010058948 -0.0022779964 0.0000152366 -0.0003596516 -0.0010817689 -0.0000964171 -0.0008609699 -0.0029134484 -0.0009711038 -0.0011204203 0.0005330965 -0.0005344504 -0.0017276751 -0.0028373017 -0.0007357140 -0.0049919960 0.0003432273 0.0045765451 -0.0024289354 0.0050582410 0.0000720828 -0.0011743822 -0.0052047589 -0.0003863016 0.0008378436 0.0078306620 -0.0048157864 0.0277260210 -0.0123065239 -0.0000645759 0.0007596189 0.0012270237 0.0011150421 -0.0005295768 0.0008077605 0.0002525035 0.0030152480 -0.0019814582 -0.0015600301 -0.0019087816 -0.0008726855 0.0006946055 0.0033113335 -0.0022441695 -0.0017614133 -0.0011283786 0.0005509678 0.0009235846 -0.0099096210 0.0067314149 0.0066257452 -0.0018991731 0.0028930218 0.0016934848 -0.0108006634 0.0067228871 0.0046895856 -0.0015744303 0.0037232723 0.0005943998 -0.0051356112 -0.0019934801 0.0024366863 0.0014824340 -0.0025406991 -0.0004290301 -0.0020181590 0.0427383602 0.0066354477 -0.0007333297 -0.0002378110 -0.0000599321 0.0088051412 -0.0067984515 -0.0122400543 -0.0032626880 0.0243713936 0.0165106861 -0.0087591675 -0.0071369671 -0.0010904719 -0.0015794246 -0.0011425332 0.0001598003 -0.0150048824 -0.0076752094 0.0070382418 0.0006043187 -0.0009999522 -0.0013363899 -0.0033562101 -0.0032379320 0.0031064409 0.0167574563 0.0004102523 -0.0093674238 0.0298043420 0.0204816211 -0.0064179348 0.2023776851 0.1171074173 -0.0415029361 0.0636220311 -0.0926930697 -0.1119581689 -0.0366986559 0.0892435145 0.0651957376 0.0164323720 0.0111152124 0.0084949650 -0.0056110566 0.0212457292 0.0007612476 -0.0048675307 -0.0156137483 0.0124927899 0.0525720874 0.0388221429 -0.0385093218 -0.0268926230 0.0463833936 0.0022676778 0.0320974405 -0.0354056005 -0.0044527314 -0.3445222042 -0.1398794913 -0.2881986355 0.1024042737 0.1907122723 0.1758814087 -0.2545585846 -0.3458070710 0.2507505614 0.0005388713 0.0026322585 0.0007760684 -0.0011766316 -0.0012062962 -0.0015801770 -0.0017571042 0.0016445832 0.0012833832 0.0031548453 0.0001784726 0.0014162135 -0.0002388868 -0.0018277879 -0.0020241038 -0.0031447798 0.0022257797 0.0010873512 0.0050897418 -0.0007883250 -0.0005321209 0.0072524347 -0.0059363322 -0.0047161631 -0.0019472373 0.0005317631 0.0002612113 0.0052644214 -0.0021900935 -0.0004436438 0.0079151786 -0.0080320361 -0.0059159513 -0.0007673946 -0.0003385108 0.0000910177 -0.0004235198 -0.0003565398 -0.0006105510 0.0024005756 0.0013451130 0.0012660995 -0.0009911755 -0.0001422686 0.0005604655 -0.0004083836 -0.0005582147 -0.0011146907 0.0045500595 -0.0000016519 -0.0005512623 -0.0027462977 0.0089004970 -0.0005825112 -0.0059300282 -0.0044918551 -0.0041310909 0.0047228051 0.0014899366 -0.0004036996 0.0024996017 0.0014246325 0.0026082247 0.0004961045 -0.0006191461 -0.0008576507 0.0005380297 0.0001725882 0.0004243226 0.0005868096 0.0030458978 0.0047565812 0.0035822188 0.0002850687 -0.0018662602 0.0016406687 -0.0036587480 0.0012664133 0.0015540666 0.0045453905 -0.0022328753 0.0078563779 -0.0012525936 -0.0007508266 -0.0041270725 -0.0004550565 0.0008589292 -0.0174397635 0.0005628944 0.0022356232 -0.0078260231 0.0047179774 -0.0005354770 0.0082755643 -0.0011023900 -0.0011264222 -0.0030761762 0.0020880171 -0.0002133715 -0.0192852952 0.0020996518 0.0038925976 -0.0106481438 -0.0073870454 0.0044999281 0.0029410752 0.0007594624 0.0043398201 -0.0037516626 -0.0003932943 -0.0051627407 0.0003010008 -0.0022409869 0.0021242745 -0.0025146058 0.0017599515 -0.0053068377 0.0010481462 -0.0021326159 0.0040546181 0.0010360418 -0.0118937107 0.0105650333 0.0023768793 -0.0010222582 0.0043572480 0.0019044640 0.0031976694 0.0004041597 -0.0082343241 -0.0057604708 -0.0072844107 -0.0080722461 -0.0172197972 0.0012374075 -0.0070600871 -0.0005960881 -0.0006045699 0.0465960101 -0.0169467146 0.0083139750 0.0115656444 0.0294102882 0.0205889322 0.0085891505 -0.0154695462 -0.0121246125 0.0027142164 0.0268689347 -0.0148922345 -0.0547279862 -0.3378418234 -0.1057000312 -0.1306948085 0.1718224686 0.0408689701 0.1053973821 -0.2265674018 0.2977716989 0.0011667313 0.0092169250 -0.0032367961 -0.0264921728 -0.0009440149 0.0036098001 0.0077828350 -0.0036368955 0.0003659017 0.0124956021 -0.0011842894 0.0009055013 -0.0155309921 -0.0056103835 0.0026792848 0.0076662996 -0.0018718654 0.0120747633 -0.0093349101 -0.0052228878 -0.0064059919 -0.0065042542 -0.0047222410 -0.0043293259 0.0035844175 0.0083651913 -0.0049304697 0.0188318601 0.0041474987 0.0207047501 -0.0011446462 0.0003675115 -0.0030594700 0.0041430316 0.0018004718 -0.0008524948 -0.0004908618 0.0009923003 -0.0003930210 0.0003447513 -0.0000934517 0.0002929371 0.0004783895 -0.0001772631 0.0005309424 0.0003960050 -0.0003340206 -0.0081488728 0.0047272567 0.0054344629 -0.0014242782 -0.0017522919 -0.0008105007 0.0008872934 0.0001489393 -0.0025511499 -0.0011941203 0.0002870869 -0.0004755411 -0.0004444314 0.0015358750 0.0008196620 -0.0006654251 0.0001930609 0.0005658732 0.0003455283 0.0005841878 -0.0016946053 0.0000038363 0.0002064426 0.0050169995 0.0016035426 -0.0021268851 0.0029587590 0.0000168954 0.0029943139 0.0052121242 0.0072324796 -0.0005795484 0.0010329323 0.0010906814 0.0011205573 -0.0012034145 0.0003339788 0.0013785155 -0.0008982121 -0.0049797870 -0.0045322355 -0.0021096392 0.0015361749 -0.0035126184 -0.0025711044 0.0010337965 -0.0001710338 0.0053427545 0.0012101570 0.0032764614 -0.0012391864 -0.0013407771 -0.0028860977 0.0046048185 0.0019771774 0.0032927114 -0.0055192800 -0.0017560891 0.0053821961 0.0029977197 -0.0057912997 0.0029849866 0.0051048842 -0.0024389471 0.0157285429 -0.0071381161 -0.0084592055 0.0047986263 0.0153168504 0.0000250366 0.0181204484 0.0105109135 -0.0063971637 -0.0006699645 0.0024771600 0.0004443213 0.0015827145 -0.0266066089 -0.0038727390 -0.0009419639 -0.0011944156 0.0036227513 0.0013059455 -0.0113847123 0.0037453474 -0.0061435770 -0.0230654726 -0.0107589083 0.0061062823 0.0085026019 0.0025212734 0.0021370916 0.0003540666 -0.0001886608 0.0113362946 0.0057958089 -0.0052358247 -0.0008058030 0.0014733086 0.0017334546 -0.0030101040 -0.0008164670 0.0004831165 0.0072376542 0.0116807792 0.0022339436 0.0216383747 0.0292597710 0.0065458766 -0.1563683704 -0.0864842890 0.0294907503 -0.0488848253 0.0717749482 0.0840808805 0.0254496177 -0.0661926151 -0.0491443478 -0.0173578520 -0.0111944221 -0.0086625265 0.0061439012 -0.0238965735 -0.0012481648 0.0068747623 0.0143628354 -0.0115077978 0.0126649398 0.0111238270 -0.0072826972 -0.0045092854 0.0037865988 0.0005806442 0.0135487493 -0.0054084812 0.0016545189 -0.2911372361 -0.1649246119 -0.3061870518 0.0430258612 0.0888014657 0.0721189626 -0.1512332624 -0.3842471512 0.1614486371 -0.0013677935 -0.0028824822 -0.0011745591 -0.0000164351 0.0013494041 0.0011040872 0.0016666687 -0.0007499693 -0.0002482082 -0.0003376845 -0.0015275343 -0.0020597522 -0.0008648970 0.0016113315 0.0013057435 0.0028293310 -0.0013390425 -0.0003653209 -0.0005789032 0.0005809342 0.0023407560 -0.0039899378 0.0041342734 0.0037232110 -0.0064942299 0.0021537920 0.0012508757 -0.0008446448 0.0018796232 0.0017670209 -0.0053838348 0.0060821563 0.0051570781 -0.0047183175 -0.0023635197 -0.0002460164 0.0030386848 0.0008583292 -0.0024425318 -0.0016132782 0.0000886340 0.0025185336 -0.0024132418 -0.0013286262 -0.0001410114 0.0015741985 0.0006426538 -0.0017424399 0.0125313947 0.0064633660 -0.0048135167 0.0099595821 -0.0066782191 0.0021307895 0.0071378222 0.0059039821 0.0056052693 0.0080420410 0.0032966762 -0.0028119865 0.0025201503 -0.0002677636 -0.0015856182 0.0016568575 -0.0023804832 -0.0032141407 0.0034234662 0.0009454889 0.0025339765 -0.0008796555 -0.0043580111 -0.0068491255 -0.0043759015 -0.0003289627 0.0022578805 -0.0084443875 0.0026397563 0.0000880092 0.0042605850 -0.0045099289 0.0009998164 -0.0045150395 0.0035994304 -0.0006670044 0.0071536851 -0.0023013114 -0.0003007865 0.0089720971 0.0034212302 -0.0026346579 0.0008593581 0.0120670678 -0.0047397443 -0.0082819324 0.0042395064 0.0000622308 -0.0021230237 -0.0059136825 0.0025381073 0.0269857577 0.0006233382 -0.0072224468 0.0188634182 0.0236223806 -0.0119199993 -0.0020737101 -0.0035584629 -0.0004920953 0.0046504468 0.0040259906 0.0030862328 0.0044662102 0.0040099490 0.0043063473 -0.0004240065 -0.0045220875 0.0028234417 -0.0108259337 -0.0033347159 -0.0166809814 -0.0058001930 0.0129113060 -0.0190919208 0.0033419275 0.0026587173 0.0029445404 -0.0030696888 -0.0008522655 -0.0040284257 -0.0067763412 -0.0010810983 -0.0092132543 -0.0019498188 0.0024522209 -0.0049916326 0.0144365992 -0.0099396182 -0.0053389678 -0.0481950626 0.1761737020 -0.1393697520 -0.0499745065 -0.1493402104 0.0755305187 -0.0943586068 0.1830957927 0.1514805535 -0.0062409623 -0.0244834910 0.0159677616 0.0552653193 0.3568800466 0.1107143909 0.1456120133 -0.1798014051 -0.0338182406 -0.1280860877 0.2383287522 -0.3044763439 0.0293404260 0.0932959397 -0.0351274227 -0.2657464034 -0.0182045185 0.0393289751 0.0735410353 -0.0427065970 0.0062063274 0.1152555194 -0.0249899478 0.0201224768 -0.1598271799 -0.0492826265 0.0241034118 0.0861740201 -0.0296150910 0.1434768639 -0.1083321090 -0.0500316757 -0.0886143665 -0.0788095490 -0.0480456993 -0.0602447100 0.0573248197 0.0993453562 -0.0392913363 0.2249311356 0.0598396185 0.2364859127 -0.0172196046 0.0079820373 -0.0385785584 0.0393880060 0.0132750670 -0.0109414752 -0.0030653473 0.0108484475 0.0024880972 0.0004800727 -0.0043869871 -0.0019139489 0.0017648669 -0.0041732358 -0.0008661398 0.0055764398 -0.0039216212 -0.0054554945 -0.0011109110 -0.0015891072 -0.0011560513 0.0005087640 -0.0009124102 -0.0005121368 0.0009211492 -0.0002715391 -0.0008041420 -0.0000891766 0.0017366860 0.0007218048 -0.0009381651 -0.0003440986 0.0004792837 -0.0000419074 0.0010053454 0.0002865849 0.0004467724 0.0005489834 -0.0001827771 0.0000124537 -0.0030522012 -0.0012559346 0.0024352843 -0.0020551928 -0.0010261894 -0.0006830657 -0.0057533922 -0.0036451775 -0.0008414853 0.0009184755 0.0009587661 -0.0009595495 -0.0003391116 0.0003381975 -0.0003106212 -0.0011064374 0.0001200355 0.0038077648 0.0015813387 -0.0014889122 0.0033969972 0.0018203907 -0.0011754198 -0.0005788843 -0.0031696993 -0.0002848220 -0.0022009401 0.0015765110 0.0010807743 0.0010972089 -0.0034426249 -0.0009570774 -0.0020320234 0.0035730714 0.0012926318 -0.0042410186 -0.0016386215 0.0026923294 -0.0022312879 -0.0035370319 0.0016645839 -0.0091997029 0.0027071526 0.0042332307 -0.0031634067 -0.0118454760 -0.0004433939 -0.0137210154 -0.0087449148 0.0046942841 -0.0003374047 -0.0006993775 -0.0002312783 0.0003079932 -0.0007442898 0.0044779480 -0.0158700613 -0.0122538184 0.0463100814 0.0001710434 0.0053476227 -0.0020119987 -0.0021687785 0.0046032959 0.0035238503 -0.0009762767 -0.0016114492 -0.0006261024 -0.0004554237 0.0001839499 0.0002144369 -0.0071060066 -0.0038265772 0.0043337569 -0.0008932647 0.0046567026 0.0013906722 0.0003296157 0.0000827069 0.0000906333 0.0004610405 -0.0034754546 -0.0021326870 -0.0036875296 -0.0075543965 -0.0030601105 0.0969870656 0.0524218399 -0.0163822743 0.0311837295 -0.0366235708 -0.0642501398 -0.0255657707 0.0365855895 0.0234553079 -0.0329718314 -0.0178485947 0.0135671366 0.0135607447 -0.0548336140 -0.0219014224 0.0341801260 0.0063548151 -0.0107512289 -0.0005519596 -0.0011053245 -0.0019402163 -0.0000461044 0.0002299403 0.0021056998 0.0013077464 0.0000683790 0.0003441253 0.0518889244 0.0378024949 0.0665429444 -0.0006769949 -0.0006547833 0.0003437920 0.0168430196 0.0851138592 -0.0212639685 -0.0122969867 -0.0271629619 -0.0081543319 -0.0073348857 0.0122215506 0.0058679673 0.0160856867 -0.0041756749 0.0013074284 -0.0119300365 -0.0113719026 -0.0182543232 -0.0063400587 0.0125772995 0.0096583982 0.0216196678 -0.0079549511 -0.0014305566 0.0147074768 0.0012044130 0.0295040968 -0.0224654938 0.0295337475 0.0293920991 -0.0015710010 -0.0006369215 -0.0022687545 0.0000646985 0.0114244225 0.0184087185 -0.0364187017 0.0393418308 0.0405200657 -0.0530160997 -0.0274946731 -0.0066155426 0.0279862110 0.0061030689 -0.0299614201 0.0090213188 0.0181770270 0.0487920471 -0.0351532289 -0.0169514763 -0.0016722044 0.0170484567 0.0038752213 -0.0274458895 0.1619579349 0.0613081097 -0.0576263322 0.0576024133 0.0248961664 -0.0035583152 -0.0118143540 -0.0025204245 -0.0023510114 0.1274541895 0.0472456645 -0.0402720257 0.0412016881 0.0018607109 -0.0100282377 -0.0009564121 0.0011030827 0.0014948214 0.0040257609 0.0010081005 0.0030575742 -0.0005686582 -0.0015650614 -0.0018184370 0.0081667406 0.0001121452 -0.0037047243 -0.1113323894 0.0253092130 0.0053350651 0.0669699273 -0.0434599803 0.0043882950 -0.0272594493 0.0432497935 -0.0122730058 0.0809079849 -0.0352046433 0.0000831241 0.0395751517 0.0494152826 -0.0251029376 -0.0238352735 0.1880478669 -0.0679780846 -0.0742621168 0.0528710544 -0.0046814920 -0.0441215999 -0.0704763334 0.0336030405 0.2727179467 0.0195794591 -0.0789793424 0.2073210893 0.2893071677 -0.1420763188 -0.0103226696 -0.0350684343 0.0119842158 0.0340063081 0.0396887217 0.0126347848 0.0538280129 0.0372971427 0.0600826562 -0.0167079460 -0.0472056216 0.0101540340 -0.1257692679 -0.0501520794 -0.1820690085 -0.0645037923 0.0974374479 -0.1778088655 0.0492084377 0.0255459624 0.0538713776 -0.0251811265 0.0084350004 -0.0450772855 -0.1198611234 -0.0411603870 -0.1443721475 -0.0615477321 -0.0542306871 -0.0524585884 -0.0052970584 0.0023277184 0.0004777422 0.0301889297 -0.0545243598 0.0407496230 0.0187719382 0.0481543775 -0.0035523217 0.0171383609 -0.0535104754 -0.0427666941 0.0015742174 0.0074602418 -0.0074445662 -0.0065081596 -0.1139031784 -0.0444805995 -0.0399475643 0.0728246461 0.0375708492 0.0298417630 -0.0897926126 0.1157050465 -0.1098132057 0.0405750886 -0.0071651418 -0.1215413864 0.0368233105 -0.0017286972 0.0676761848 0.0109923017 -0.0102865766 0.0954165554 0.0130203007 -0.0079984426 -0.0190216388 -0.0570391680 0.0222246932 -0.0383396738 -0.0543914675 -0.0093520559 -0.0406294152 0.0233846008 -0.0631893223 -0.0240878469 0.0147641920 -0.0432962998 0.0840527752 0.0361208108 0.0775104989 0.0502490026 0.0495283945 0.0174947125 0.0086452544 0.0057605197 0.0062232531 0.0068800082 0.0119827495 -0.0037863252 0.0015161385 0.0016754093 0.0002930515 -0.0016654367 -0.0013793084 0.0009670155 -0.0010193443 0.0001992645 -0.0021282552 0.0013407144 -0.0018378291 -0.0027862854 -0.0076725937 -0.0049603139 0.0017256159 0.0021792991 0.0024284355 -0.0003676224 0.0007082184 0.0029726915 0.0007067706 -0.0012475801 -0.0003903649 0.0006502854 0.0001562397 -0.0013241052 -0.0006362519 -0.0010419944 -0.0011764754 0.0002358181 0.0000909163 -0.0012110003 -0.0008335081 -0.0014137369 -0.0019390753 0.0004437072 -0.0044296872 0.0001753255 0.0038818548 -0.0012632794 0.0008586544 0.0014231185 0.0003274603 -0.0010107264 -0.0006678520 -0.0002104074 0.0004374520 0.0004937126 -0.0000416509 0.0003874494 -0.0007917875 -0.0013983744 -0.0011745684 0.0004651394 -0.0011760046 -0.0007390160 0.0003944602 -0.0001042392 0.0014268697 0.0002415781 0.0010370461 -0.0007210977 -0.0005630972 -0.0006950873 0.0015623272 0.0005068830 0.0008531484 -0.0014176592 -0.0005675145 0.0029436855 -0.0002151600 -0.0012914427 0.0013763220 0.0030589639 -0.0000479061 0.0041658215 -0.0012853841 -0.0017277475 0.0013162498 0.0041521825 0.0000780686 0.0055345846 0.0033688316 -0.0018888628 0.0008046314 -0.0002623546 0.0000097380 -0.0027093703 0.0100671893 0.0018964180 0.0016552983 -0.0011095659 -0.0203950385 -0.0005042884 0.0002475538 0.0000159490 -0.0010675311 -0.0016849097 -0.0005635645 0.0007515987 0.0007029441 0.0001279396 0.0000308018 0.0000884958 -0.0000282012 -0.0004635623 -0.0005015969 0.0003344226 -0.0007038114 0.0020313976 0.0004843977 -0.0001403807 0.0000574481 0.0000713945 0.0001293330 0.0000536546 -0.0000239636 -0.0000259425 -0.0005208386 -0.0002621406 0.0052467246 0.0050695356 -0.0024554802 0.0016899519 -0.0015722887 -0.0043785465 -0.0021676329 0.0031681907 0.0020218888 -0.0126022410 -0.0063543039 0.0067402347 0.0051150297 -0.0228503218 -0.0097536428 0.0165745659 0.0018091838 -0.0044933392 -0.0001608227 -0.0002398833 -0.0009703289 0.0002241723 -0.0007823891 0.0008257596 0.0014122427 0.0001028088 0.0004197860 -0.0003812682 0.0016663983 0.0024287885 0.0005760523 0.0027694230 0.0009508776 -0.0007646767 0.0024888703 0.0003630188 0.0060165939 -0.0005058411 0.0072175617 0.0445528613 0.0005247258 0.0234520515 0.0026154501 -0.0246195613 -0.0284800287 -0.0374624040 0.0144099692 0.0028245618 0.0257515694 0.0132452990 0.0263744039 0.0211687765 -0.0333236434 -0.0247844185 -0.1752088714 0.0180234670 -0.0689422015 -0.1049073910 0.0667603160 0.0342125044 0.0052536296 -0.0012903235 -0.0002497431 -0.1252969407 0.0222363406 -0.0310814196 -0.1011677022 0.0899623769 0.0420873713 -0.0311663683 -0.0105756380 0.0245083636 -0.0083925237 -0.0126960050 -0.0312538812 0.0421472748 0.0174731911 -0.0046065000 -0.0185470583 0.0013481474 0.0354938612 -0.0289787089 -0.0260427734 -0.0386560257 0.0978784711 0.0560110155 -0.0039102130 0.0831580127 0.0638486125 0.0939705209 -0.0149956319 -0.0094775471 -0.0066799993 0.0967135639 0.0525084576 0.0147544060 0.0924218249 0.0846146502 0.1298288704 0.0007933482 -0.0011835504 -0.0014843076 0.0011518355 0.0002108703 0.0008015040 0.0012649535 0.0047800512 0.0074268207 0.0033417062 0.0000051474 -0.0020168895 0.0973457702 0.0336320746 -0.0279137608 -0.1160616149 -0.0143270164 0.0240651147 -0.0687601831 -0.0428572694 0.0273833720 -0.0464816112 0.0689763377 -0.0186615061 0.1895483568 -0.0765268216 0.0015806237 0.1531301406 -0.3127023886 0.0944821958 -0.0221113120 -0.0402458286 0.0185735913 0.0861659819 0.0342150839 -0.0278859785 -0.0298831923 -0.0499732121 0.0290536546 -0.0728171827 -0.2132497463 0.0913429030 0.0853166098 0.0311869869 0.1080592756 -0.0795547240 -0.0083663114 -0.1115401639 -0.0053871153 -0.0506304783 0.0312716492 -0.0522979675 0.0276314130 -0.1038128445 0.0259169478 -0.0456846975 0.0880140450 0.0208864763 -0.2546658569 0.2246782363 0.0302444957 -0.0393113015 0.0766595755 0.0586624936 0.0934778410 0.0163878031 -0.1485254875 -0.1256150614 -0.1184111149 -0.1769287379 -0.3913300656 0.0381128852 0.0001241604 -0.0000889708 -0.0004203139 0.0039080261 0.0012091919 -0.0014605190 0.0005772847 -0.0010608348 0.0066611266 -0.0051093258 0.0020923997 0.0021613486 0.0000103681 -0.0013536486 -0.0005884058 0.0083388147 0.0161118287 0.0003249813 0.0101692693 0.0003066958 0.0128178303 -0.0136679664 0.0039801909 -0.0040677879 0.0080677486 0.0022216499 -0.0012895860 -0.0014144016 -0.0041068608 0.0020875639 -0.0016614447 -0.0033022813 0.0012500780 -0.0035549277 -0.0063022360 0.0037728725 -0.0041369065 0.0020560444 -0.0004863026 -0.0030023459 -0.0015146298 -0.0029492199 0.0011202963 0.0055704882 -0.0036096673 0.0011739024 0.0029548745 -0.0010573123 0.0024006028 -0.0017623277 0.0055222923 -0.0029459205 0.0020171111 -0.0056394280 0.0002103653 0.0004897092 0.0003614878 0.0005786343 -0.0007548575 -0.0006413865 0.0005327874 -0.0007744077 0.0031133466 0.0007758241 0.0006679469 -0.0016579665 -0.0026068472 -0.0003571024 -0.0040720987 -0.1763537325 0.1175058995 0.1997176809 -0.0589788857 -0.0305359023 0.0235155456 0.0089169209 0.0239280470 0.0030762912 -0.0144764340 0.0272424079 0.0220831312 -0.0049631506 -0.0063048260 0.0011784703 0.0163868241 -0.0213550476 -0.0179012225 -0.0075898629 0.0041459140 0.0063326222 -0.0147817549 -0.0271468065 -0.0046609763 -0.0084093618 -0.0269577205 -0.0061904867 -0.0649774122 0.0095324551 0.0429396390 -0.0100570684 0.0078445545 0.0088609432 0.0267635092 -0.0379305487 -0.0350741670 0.0337528208 0.0273908004 -0.0116547894 -0.0673757295 0.1097276739 0.0587732363 -0.1335879001 -0.0687306821 0.0499854379 -0.1170352209 -0.0581835383 0.0418358888 0.0103381319 0.1095235350 0.0110943200 0.0771805300 -0.0675535333 -0.0440349538 -0.0287398446 0.1204315066 0.0293525265 0.0671983084 -0.1245225052 -0.0468576638 0.1901712622 0.0211628369 -0.0767023318 0.1045945858 0.2407062410 -0.0027381239 0.3067342320 -0.0742369272 -0.1425498156 0.1062387014 0.3894146221 0.0143433690 0.4598384575 0.2984666918 -0.1530435852 0.0114140059 0.0046301628 -0.0002725663 -0.0056565396 0.1544656976 0.0302201388 0.0004126209 0.0003258135 -0.0019952772 -0.0038125798 -0.0073066560 0.0002945117 0.0107233088 0.0133364624 0.0043555534 -0.0058497682 -0.0049235073 -0.0011244846 -0.0004672556 -0.0002856142 0.0001226200 -0.0002831768 0.0000971098 0.0006683130 0.0022394403 0.0006181050 0.0003744329 0.0006495535 0.0000329640 0.0002648508 -0.0023521724 -0.0015369280 0.0016055637 0.0008908241 -0.0025837511 0.0022114751 0.0108351212 0.0021160551 0.0007569080 0.0047713448 -0.0049942041 -0.0077881731 -0.0041433714 0.0017961579 -0.0000125262 -0.0119972416 -0.0109515887 -0.0155390264 0.0032692441 0.0005048697 0.0104645328 -0.0216849929 0.0073243486 0.0001394840 0.0020630422 0.0013784351 -0.0001947444 -0.0015571542 0.0045349090 -0.0014902270 -0.0028238576 -0.0025282587 -0.0016568845 -0.0102961386 0.0210092051 0.0266429805 -0.0175815073 0.0084855024 -0.0451155949 0.0327377198 0.0063667768 -0.0277634315 -0.0003519134 -0.0018305136 -0.0010718157 -0.0029417581 0.0003494050 -0.0013913266 -0.0007550656 0.0030374219 0.0032973212 0.0098023212 -0.0045669563 -0.0021730254 -0.0041012332 -0.0004486319 -0.0023249854 -0.0004707032 0.0025441170 0.0021617717 0.0095774739 -0.0013958701 0.0043725125 0.0085208580 -0.0049018648 -0.0025069261 -0.0301097485 0.0088186624 0.0055906683 0.0130811571 -0.0011873083 0.0046164317 0.0067447448 -0.0053408900 -0.0010370452 0.0002083857 0.0003303368 0.0012360319 -0.0011866121 -0.0007746285 -0.0005388439 0.0014169107 0.0001460650 -0.0016220021 0.0001396482 0.0005856152 0.0016766248 -0.0018470395 -0.0013753108 -0.0012051875 -0.0001874591 0.0010250787 0.0013576753 0.0020379473 0.0026768002 0.0043837544 0.0011021094 -0.0000305984 -0.0003929114 0.0011860669 0.0005467062 0.0019418394 0.0033329234 0.0036046293 0.0063437335 0.0073708435 -0.0102447773 -0.0142343127 0.0136421441 0.0040295341 0.0102838023 -0.0000479067 0.0000100009 -0.0000504375 -0.0010443470 0.0000489580 0.0005481626 -0.0113770138 0.0004015114 0.0015089171 0.0096469689 -0.0002725130 -0.0016966630 0.0060261032 0.0036058155 -0.0023382460 0.0048224855 -0.0062324700 0.0015822560 -0.0185925889 0.0068304333 0.0001459854 -0.0132537345 0.0285057532 -0.0086633422 0.0026430684 0.0039039730 -0.0018993823 -0.0086315450 -0.0036567317 0.0028697584 0.0016956850 0.0049451374 -0.0025279267 0.0073386274 0.0210762627 -0.0090069300 0.0038729055 0.0019924256 0.0048375642 -0.0058794546 -0.0030450364 -0.0060027525 0.0004125934 -0.0024206092 0.0025482150 -0.0031184770 0.0016005013 -0.0061646794 0.0005539168 -0.0028207079 0.0035090675 0.0007466101 -0.0137159058 0.0117356897 0.0018831694 -0.0015892043 0.0040532324 0.0030493755 0.0046655616 0.0009905650 -0.0089463832 -0.0066067051 -0.0076705000 -0.0090035511 -0.0200035433 0.0021191928 -0.0002701822 0.0049576762 0.0019265486 -0.0057327790 -0.0365997658 0.0339124847 0.0056329072 0.0238878032 -0.0339487480 0.0276263473 -0.0422958928 -0.0367273961 0.0017091816 0.0013963223 -0.0001740728 -0.0113562661 -0.0115792470 0.0040788262 -0.0102492439 0.0028114035 -0.0117563583 0.0005636307 -0.0011459705 0.0036864138 0.0958028980 0.0491141125 -0.0235573076 -0.0764828014 -0.0542328797 0.0301144907 0.0040397490 -0.0497868663 0.0159559421 -0.0279885939 -0.1021144595 0.0522298462 -0.1034675711 0.0071213976 0.0043568026 -0.0998937413 -0.0104463969 -0.1345059026 0.0567042049 0.1159389051 -0.0209125671 0.0572141885 0.0638616987 0.0192552170 0.0080101104 -0.0696749814 0.0937590618 -0.1446881229 -0.0016225005 -0.1877856943 0.0280484612 -0.0065065983 0.0408691593 0.0316410257 0.0082387559 -0.0027412157 0.0060279033 -0.0013904597 0.0020519023 -0.0072153520 -0.0026749571 0.0039035402 -0.0042478238 0.0034122414 -0.0076446187 0.0200560857 -0.0134716953 -0.0237817460 0.0021659778 -0.0035975141 -0.0021400087 0.0009785451 -0.0035131020 -0.0018850137 0.0058010901 -0.0030008108 -0.0053914005 0.0004170960 0.0059560354 0.0014749791 -0.0039376555 0.0007772088 0.0026927452 0.0003280925 0.0027829287 0.0009143449 -0.0016338132 -0.0011055833 0.0016612463 0.0029202744 -0.0107924223 -0.0018694752 0.0110063021 -0.0057032662 -0.0083349929 0.0010562765 -0.0133789147 -0.0053265133 -0.0014173291 0.0032944432 0.0021772334 -0.0076681017 -0.0005791050 0.0047853007 0.0155163765 -0.0187437342 -0.0141161336 0.0144215180 0.0067231916 -0.0054175041 0.0124611535 0.0071196151 -0.0043173166 0.0003144557 -0.0113987940 -0.0017682161 -0.0082664601 0.0056802990 0.0044358719 0.0032047190 -0.0120117768 -0.0030524709 -0.0078225190 0.0109156718 0.0049215889 -0.0234718664 0.0011987977 0.0100273376 -0.0107622727 -0.0202540477 0.0016187302 -0.0329163801 0.0091566527 0.0152457733 -0.0116182386 -0.0340536550 -0.0002320999 -0.0476153788 -0.0298067169 0.0160022530 0.0005156059 0.0010183856 -0.0003499366 -0.0066793178 -0.0300614717 0.0077650700 0.0100911218 0.0100559489 -0.0472192695 -0.0001059695 -0.0010757976 -0.0001302385 -0.0020752505 -0.0035640386 -0.0013885614 0.0020039825 0.0017253892 0.0004153605 -0.0001215110 0.0000751782 -0.0004119830 0.0004921520 -0.0019516188 -0.0000266404 -0.0021863211 0.0027195621 0.0008665464 -0.0001684174 0.0001832142 0.0002051114 -0.0002583840 0.0005554265 0.0003560233 -0.0003035029 -0.0008220138 -0.0007550894 -0.0058415381 0.0136723988 -0.0110700233 -0.0027629934 0.0018470620 0.0047487858 0.0008071221 0.0090806076 0.0079355113 -0.0114281644 -0.0032213674 0.0165629772 0.0055703233 -0.0315705703 -0.0205485924 0.0351355110 -0.0030702465 -0.0051744303 -0.0012648265 -0.0013478566 -0.0017211897 0.0008882549 -0.0022066271 0.0016416844 0.0023151184 0.0007921175 0.0010171266 0.0038960218 0.0013116977 0.0031724180 0.0018301814 0.0001236840 0.0042371747 -0.0024032484 0.0059368831 0.0011805076 -0.0076854615 -0.0209146311 -0.0082412249 -0.0352546470 0.0064171130 -0.0146716912 0.0056956205 0.0166175276 0.0217082746 0.0194191930 -0.0178268715 -0.0137553665 -0.0219686940 -0.0012241691 -0.0123657950 -0.0017393909 0.0191202615 0.0167011083 0.1306345301 -0.0179350461 0.0700354281 0.0634536242 -0.0328958439 -0.0084788710 -0.0035280975 0.0001335172 -0.0014589479 0.0864034013 -0.0085262723 0.0330617836 0.0484277638 -0.0399768292 -0.0035535192 0.0217750658 0.0135310534 0.0169520448 -0.0229825065 -0.0096247497 0.0083691108 0.0190873892 -0.0034206269 -0.0415517088 0.0132478504 0.0123533693 0.0225739529 -0.0282861863 -0.0180023184 -0.0021584091 -0.0669908546 -0.0125983034 0.0378589067 -0.0013484780 0.0157731201 0.0491412792 -0.0044365737 -0.0066593869 -0.0050378171 -0.0349256564 -0.0024842628 0.0375709154 0.0209369521 0.0495976692 0.0792984298 -0.0014480188 0.0019852699 0.0025811875 0.0011710618 0.0003228858 0.0008922939 0.0017107184 0.0061932878 0.0093474520 -0.0013717176 -0.0000205530 0.0001912240 -0.1567739439 0.0200852804 0.0153411199 0.1260946564 -0.0140841915 -0.0174390858 0.0653548120 0.0478947057 -0.0287010929 0.0705160628 -0.0831198443 0.0200702861 -0.2222477454 0.0875018951 -0.0007339623 -0.1604232463 0.3626821863 -0.1120375064 0.0297334382 0.0511213429 -0.0243926733 -0.1106652757 -0.0471619826 0.0369524303 0.0196612594 0.0655918515 -0.0310749599 0.0989913045 0.2765912858 -0.1192464825 0.0689840163 0.0497019657 0.0724756991 -0.1043349358 -0.0657766182 -0.0953459712 -0.0158469360 -0.0530607054 0.0158717172 -0.0415309372 0.0441854757 -0.0997024463 0.0544930797 -0.0292159736 0.1180066022 0.0375180464 -0.2480730546 0.2481273775 0.0048135400 -0.0351760401 0.0347093297 0.0578866121 0.0671996909 0.0357454682 -0.0804700950 -0.0809933838 -0.0525859232 -0.1065644913 -0.2767581451 0.0555179522 0.0011196790 -0.0004208510 -0.0007766767 0.0009535337 0.0128995336 -0.0105496839 -0.0034593117 -0.0125670545 0.0126238703 -0.0123248998 0.0142169775 0.0120417831 -0.0015873357 -0.0020739105 0.0006207788 0.0166410113 0.0381928778 0.0029511819 0.0275894325 -0.0174120784 0.0127930980 -0.0177239000 0.0183261509 -0.0224156389 -0.0005000146 0.0009108850 -0.0002552446 -0.0036167292 0.0003507050 0.0004872647 0.0016198775 -0.0001864074 -0.0001190179 0.0014151203 -0.0004585768 0.0003803168 -0.0023955997 -0.0009137944 0.0004774236 0.0006385169 -0.0006133097 0.0014971657 -0.0015197229 -0.0004122509 -0.0015784916 -0.0005537738 0.0000289920 -0.0007678623 0.0018500923 0.0015490443 0.0008898282 0.0015720536 0.0009039524 0.0010892254 -0.0002989054 0.0002048341 -0.0005503064 0.0008278984 0.0003795810 -0.0004414503 -0.0001744049 -0.0002179950 0.0011588688 0.0001753227 0.0003888033 -0.0001634103 -0.0004955888 0.0005327650 -0.0011574279 -0.0150741243 0.0043421697 0.0176951078 -0.0381548899 -0.0240519107 0.0135456331 0.0095719212 0.0145469055 -0.0007543407 0.0059589262 0.0142975301 0.0026640209 -0.0067513253 -0.0022753271 0.0030714336 0.0058656115 -0.0111212743 -0.0075964473 -0.0071148000 0.0012414226 0.0049052645 -0.0011884492 -0.0150428419 -0.0032138227 -0.0076929811 -0.0116411891 0.0022913861 -0.0349703735 0.0039892475 0.0214161584 -0.0086039332 -0.0041508507 0.0030822374 0.0031328305 -0.0088251938 -0.0055497980 -0.0072163640 0.0080854814 0.0025152986 0.0328849582 -0.0213683892 -0.0165336074 0.0051497173 0.0023256891 -0.0008797389 0.0032544346 0.0037416096 -0.0008426656 0.0031937382 -0.0049244871 -0.0021644494 -0.0040133166 -0.0000546776 0.0016105346 0.0037708300 -0.0046500170 -0.0023498046 -0.0040921094 0.0019182653 0.0019509698 -0.0160521167 0.0070238234 0.0079733892 -0.0039613631 -0.0001695990 0.0033458332 -0.0180505037 0.0090754957 0.0091462887 -0.0051984191 -0.0026513704 0.0018464292 -0.0170992301 -0.0083067732 0.0061938562 0.0009675115 0.0061176750 0.0010216567 -0.0013194135 -0.0167293414 0.0004203531 -0.0012685263 -0.0011827753 -0.0013595909 0.0133694464 -0.0152007673 0.0076759069 0.0249674979 0.0334783318 0.0097648340 -0.0168162785 -0.0149118890 -0.0032472104 -0.0016277598 0.0011635948 0.0022991974 -0.0114675300 -0.0028457715 0.0080878621 0.0016181424 0.0011556013 0.0010923826 0.0013311512 -0.0004832958 0.0001142571 -0.0050546123 -0.0004369475 0.0024045893 -0.0002899099 0.0049999582 0.0030567047 0.1912071032 0.0633737748 -0.0031050494 0.0608456664 -0.0638355611 -0.1225534346 -0.0524228298 0.0433417927 0.0207568959 -0.0171044705 -0.0114027625 0.0030303564 0.0057603549 -0.0181229526 -0.0142951449 0.0116854596 0.0143660076 -0.0138573082 0.0079560871 0.0042388399 -0.0069934859 -0.0058016290 0.0128163910 0.0033954854 0.0019141769 -0.0076142280 -0.0030522972 0.0199644679 -0.0113595520 -0.0142623851 -0.0134644167 -0.0466296141 -0.0268866545 0.0251314573 -0.0154664828 -0.0191016214 -0.0004128960 -0.0001563152 -0.0001231605 0.0001925131 0.0002614140 0.0004183716 0.0004631204 -0.0004121016 -0.0002463793 -0.0006459704 0.0000519321 -0.0002154709 -0.0001750049 0.0004156515 0.0003609471 0.0008630044 -0.0007088896 -0.0003642589 -0.0000652562 0.0006635879 -0.0000390787 -0.0018652682 0.0020800343 0.0010356473 0.0004203758 -0.0002215467 -0.0002956143 -0.0009402791 0.0003863633 0.0002527300 -0.0017842672 0.0018116036 0.0012600028 0.0003333563 0.0002028819 -0.0000579791 0.0003047662 0.0005017200 0.0013557164 -0.0026546921 -0.0018867293 -0.0023330808 0.0022631403 0.0010678482 -0.0000659014 -0.0006779029 -0.0000577923 0.0009065330 -0.0008287876 -0.0015346305 0.0003152789 0.0000590476 0.0002077872 0.0011404094 0.0069398110 0.0052913551 0.0051049695 -0.0053645093 -0.0018784694 0.0017643742 -0.0020357182 -0.0012349065 -0.0004757255 -0.0001212595 0.0001986407 0.0002858173 -0.0000524213 -0.0000193374 -0.0000267158 -0.0007683127 -0.0034170866 -0.0053961752 -0.0042571175 -0.0002526881 0.0018318502 -0.0008768332 0.0004112124 -0.0000386235 0.0007041187 -0.0004642888 0.0000353261 -0.0006205925 0.0001697353 0.0000369601 0.0006339224 0.0002516730 -0.0001956451 0.0015108832 0.0000937743 -0.0001162258 0.0007226415 0.0004498816 -0.0001494937 -0.0007715013 0.0005760617 -0.0000663397 -0.0003900217 -0.0009718090 0.0004314537 0.0026370032 0.0002966530 -0.0006563241 0.0021806629 0.0026441168 -0.0012575004 0.0008753942 0.0000023656 0.0013748998 -0.0008066020 0.0001393404 -0.0013119439 0.0001429626 -0.0002757344 0.0004567077 -0.0005734328 -0.0000668309 -0.0008488894 -0.0000216888 -0.0004051629 0.0004628614 -0.0001162491 -0.0021080398 0.0014426636 0.0003023125 -0.0005250659 0.0008634141 0.0007063835 0.0012923402 0.0000746370 -0.0016805460 -0.0014921181 -0.0013433095 -0.0020667811 -0.0043946716 0.0002846698 0.0053021038 -0.0009018247 0.0046303184 -0.1038508933 0.0427184096 -0.0217765053 -0.0324871130 -0.0451553635 -0.0961398884 0.0534986100 0.0322350635 0.0177182754 -0.0011405585 0.0207464470 0.0469857321 -0.2873856979 -0.1912768300 0.1464716418 -0.2233454939 -0.2843926805 -0.6068779992 0.3596558531 0.1880460041 -0.2730120059 0.0017015084 -0.0025464204 0.0009316437 0.0062482201 -0.0001583279 -0.0004343500 -0.0020450774 0.0005629095 0.0000206174 -0.0027847081 0.0016001622 -0.0005662744 0.0045496081 0.0016742989 -0.0007774745 0.0022018332 -0.0000744856 0.0037160068 -0.0002388910 -0.0016454954 0.0005256971 -0.0014121788 -0.0008499794 -0.0012963820 -0.0003843221 0.0004627921 -0.0008292036 0.0022455113 0.0007297685 0.0030198552 -0.0018830593 0.0012141002 -0.0024963334 -0.0016839494 -0.0007778908 -0.0001807971 -0.0008595829 -0.0032467781 0.0058551181 0.0037113935 0.0028390449 -0.0037678818 -0.0039250747 0.0062399357 -0.0069352343 0.0214141662 -0.0645176592 -0.0517801913 -0.4273706436 -0.2877848630 0.1506064800 0.1089047915 0.1518163673 -0.0133144917 0.0798394312 0.1274141091 -0.0066677912 -0.0831843219 -0.0076805095 0.0468025602 0.0621934766 -0.1263706017 -0.0839756858 -0.0816626806 0.0343104995 0.0644255216 0.0109268691 -0.1655939466 -0.0528811515 -0.0954255916 -0.1270186955 0.0293704886 -0.3661055588 0.0266966688 0.2317021619 -0.0961437801 -0.1225538433 0.0194064790 0.0011845939 -0.0474196551 -0.0212725903 -0.0414208410 0.0341698057 0.0344485701 0.1437381587 -0.1019046210 -0.1173196766 0.0175509850 0.0088860900 -0.0035567380 0.0144404895 0.0215361955 -0.0029527486 0.0207593286 -0.0185287636 -0.0118228572 -0.0171842624 -0.0092409652 0.0056141841 0.0181204628 -0.0161129552 -0.0101463995 -0.0200714669 -0.0042829315 0.0078513301 -0.0800926180 0.0452321009 0.0413595818 -0.0173495400 0.0459909536 0.0200169525 -0.0846838621 0.0496423041 0.0427621505 -0.0233577998 0.0216801554 0.0131006507 -0.0687619169 -0.0258205593 0.0250860756 0.0035097509 0.0698523620 0.0147875172 -0.0117568334 -0.3184349116 -0.0423249708 0.0015934897 0.0008102936 0.0004721001 -0.0145679113 -0.0039927160 0.0013145430 0.0608328732 0.0142545154 -0.0165965273 -0.0211269069 -0.0145185210 -0.0011782034 -0.0017310971 -0.0018991297 0.0001970562 0.0038273659 0.0016417325 -0.0017321473 0.0018431965 0.0011522761 -0.0024793239 0.0010957457 0.0013517777 0.0000042258 -0.0215847634 0.0100595645 0.0161612006 -0.0023439815 0.0139844991 0.0088941453 -0.0383232736 -0.0135739755 0.0010480539 -0.0071750800 0.0048062318 0.0244954073 0.0057698170 -0.0049196671 -0.0050267248 0.0078555984 0.0063065210 0.0060571909 -0.0016389071 0.0161450579 0.0030895767 -0.0101727446 -0.0170409520 0.0146998596 0.0015904886 0.0001213358 -0.0060967932 -0.0014061689 0.0048108305 0.0085147657 0.0055232554 -0.0064705529 -0.0024157505 0.0404478529 -0.0532618324 -0.0691741281 -0.0372360680 -0.1274600225 -0.0648070318 0.0581875161 -0.0742390444 -0.0434407391 -0.0015858081 0.0013096763 -0.0002698611 -0.0015753429 0.0004454182 0.0004665630 0.0008343287 -0.0001317060 0.0006607037 0.0014510326 -0.0003117072 0.0000433831 -0.0048298373 0.0010416543 -0.0011130092 0.0041301204 -0.0027888278 -0.0011856128 0.0190622003 0.0056503650 0.0018690067 -0.0043747894 0.0097699390 0.0024891032 -0.0030113510 -0.0000837411 -0.0011978012 0.0041356972 0.0005336172 0.0030370667 -0.0022345730 0.0037062895 0.0030460190 -0.0010803449 -0.0002498688 0.0011412446 -0.0009516889 -0.0010681808 -0.0023097949 0.0031606055 0.0016336597 0.0010940574 -0.0015170023 -0.0003572344 0.0011375926 -0.0005218858 -0.0006892516 -0.0012951759 0.0039603443 0.0028316432 0.0000454847 0.0038254398 0.0028280845 0.0041849005 -0.0048887626 -0.0029293542 -0.0025814645 0.0028177608 0.0007941793 0.0002423807 0.0028042739 0.0020497299 0.0030674184 0.0006151296 -0.0003826453 -0.0004829814 0.0019233011 0.0004873703 0.0014745926 0.0006276824 0.0017341690 0.0030133122 0.0027294989 0.0002423336 -0.0011807776 0.0003104481 -0.0008341526 0.0002678719 -0.0002357515 0.0007510825 -0.0002631278 0.0013367794 -0.0000104666 -0.0002162292 -0.0007409069 -0.0003488927 0.0002551061 -0.0024264398 0.0002951941 0.0002209617 -0.0014850860 0.0007395318 -0.0000642167 0.0012329990 -0.0004640617 -0.0000568991 -0.0000858093 0.0008409615 -0.0003043035 -0.0035029581 -0.0000173975 0.0008550884 -0.0022708309 -0.0021319579 0.0011425849 -0.0015003406 -0.0010971323 -0.0014508893 0.0018849929 0.0012447971 0.0016931273 0.0002328123 0.0009444240 -0.0004240798 0.0007404800 -0.0008731711 0.0018316742 -0.0003669384 0.0009930620 -0.0011056847 -0.0006585095 0.0041331883 -0.0040493894 0.0000896438 0.0006013680 -0.0003648183 -0.0009471489 -0.0009051640 -0.0007564460 0.0007042779 0.0011228609 0.0003857905 0.0013171733 0.0040259050 -0.0010272782 0.0052927055 0.0021222920 -0.0034181520 -0.0067836916 -0.0063912243 0.0039860007 0.0001851804 -0.0166645403 0.0162574546 -0.0251081159 -0.0003344972 0.0005858444 0.0033789583 -0.0047308969 -0.0133522093 0.0856843783 0.0553058239 -0.0408964749 0.0701591443 0.0842054050 0.1772468510 -0.1199811071 -0.0513921238 0.0829251221 0.0012404073 -0.0017206593 0.0005915772 0.0066529387 -0.0004546078 -0.0005455181 -0.0027291285 0.0003966084 0.0001888372 -0.0020639110 0.0017086121 -0.0007459650 0.0049014846 0.0014449592 -0.0008606198 0.0009792613 0.0000442535 0.0014065081 -0.0000257027 -0.0011519586 0.0005476622 -0.0005857468 -0.0003439890 -0.0004255632 0.0000207696 0.0002926297 -0.0002589343 0.0010333665 -0.0000861779 0.0007449649 -0.0009258451 0.0005733395 -0.0007014333 -0.0019822811 -0.0005736918 0.0006697652 0.0004303602 -0.0005792356 -0.0002609529 -0.0000481358 0.0007014753 0.0006350231 -0.0004293436 0.0011732882 0.0001341077 -0.0009369841 -0.0120258497 -0.0126692131 -0.0812935641 -0.0520544181 0.0294276405 0.0208459003 0.0310478101 -0.0018200521 0.0150705858 0.0247521667 -0.0009953967 -0.0163420502 -0.0054129756 0.0078163105 0.0129937056 -0.0239810061 -0.0166769860 -0.0160874354 0.0056497763 0.0120027801 0.0036197288 -0.0313913392 -0.0102207347 -0.0193770759 -0.0150228970 0.0090649658 -0.0734105766 0.0073624663 0.0465087441 -0.0171345705 -0.0180177277 0.0099102123 -0.0001865576 -0.0112173640 -0.0032728833 -0.0099809669 0.0124454265 0.0060385454 0.0492148555 -0.0329377739 -0.0180256518 -0.0001126273 -0.0008381577 0.0005651982 -0.0009147223 0.0033353844 0.0004870538 0.0051244798 0.0009217774 -0.0025243270 -0.0011379002 -0.0071477178 -0.0000466373 0.0037001213 0.0018603266 -0.0013633840 -0.0020160867 -0.0076612249 -0.0008335681 -0.0111797412 0.0115645068 0.0128512109 -0.0030017096 0.0282429491 0.0014461589 -0.0125624341 0.0134648569 0.0068251267 -0.0004182552 0.0219782430 0.0054155975 0.0022855278 0.0056278020 0.0024943257 -0.0002899663 0.0150388853 0.0034440547 -0.0009465940 -0.0825206467 -0.0138569033 0.0001432136 -0.0000296388 0.0001960475 0.0500898000 -0.0589017936 -0.0505905503 -0.2287173208 -0.0098240272 0.0896981513 0.0893269320 0.0574593186 0.0036728317 0.0007956558 0.0013355580 0.0001576777 -0.0012087267 -0.0010946746 -0.0009389354 -0.0035302198 0.0000900394 0.0007047178 -0.0021432996 -0.0017296963 -0.0018570769 0.0737909777 -0.0410836991 -0.0582437986 0.0089793970 -0.0665993891 -0.0446620702 -0.0215348795 -0.0121353845 0.0041845307 -0.0167397068 0.0269162187 0.0095628496 0.0078632833 -0.0148665692 -0.0061834652 -0.0148208237 -0.0083739276 -0.0073548986 0.0056148612 -0.0276100318 0.0169246401 0.0051008269 0.0112328426 -0.0111918282 -0.0188146863 -0.0091884807 0.0281302614 0.0107556168 -0.0248665278 -0.0239386995 -0.0242042303 0.0198027486 0.0037382294 -0.0839805697 0.2471824686 0.3428048003 0.1540410174 0.4570983919 0.2573937462 -0.2228452137 0.3958856495 0.1560057750 -0.0000492918 0.0001199234 -0.0005131849 -0.0003537280 -0.0000746457 -0.0000530805 -0.0003666287 0.0003260392 0.0003377242 0.0020691912 -0.0006069332 0.0000048513 -0.0018589631 0.0001551365 -0.0005746204 0.0006991575 -0.0001187911 0.0003323867 0.0054776835 0.0011711794 0.0006205837 0.0002094730 0.0013953417 -0.0004023356 -0.0062345834 0.0023896476 0.0014827158 0.0027475159 0.0007561546 0.0004561603 0.0013515552 0.0002194419 -0.0002255128 -0.0003436146 -0.0001167492 -0.0000898099 0.0000772762 -0.0000121039 -0.0002740820 0.0006925067 0.0003752331 0.0004485678 0.0001644929 0.0001407752 0.0001605049 -0.0003027147 -0.0002275800 -0.0002987289 0.0002824811 -0.0011454752 0.0001275871 0.0006264977 0.0002908652 0.0005238431 -0.0023365521 -0.0010780931 -0.0007637037 -0.0000732637 0.0000108924 0.0002011526 0.0002049040 -0.0001735115 0.0003103847 0.0018111438 -0.0023628109 -0.0030310672 0.0027768970 0.0006157667 0.0018163492 0.0002612948 0.0007506074 0.0012600658 0.0014192807 0.0000103966 -0.0006812267 0.0011624280 -0.0007585868 0.0001159306 -0.0014918298 0.0007127984 -0.0000247053 0.0013799307 -0.0001830929 -0.0001437989 -0.0011679284 -0.0004362160 0.0003634540 -0.0027156370 0.0000984725 0.0003438782 -0.0014846493 -0.0002641645 0.0003497165 0.0013266897 -0.0009470877 0.0001249386 0.0006054922 0.0016140108 -0.0007051040 -0.0042892062 -0.0005597984 0.0010922762 -0.0034723835 -0.0041578256 0.0020979478 -0.0005436633 -0.0002867388 -0.0006514237 0.0007019091 0.0004991518 0.0005963417 0.0000000474 0.0003092811 -0.0002052601 0.0002869211 -0.0002603554 0.0006852185 0.0002225452 0.0002844159 -0.0003494928 -0.0000189105 0.0012939611 -0.0012394943 0.0000156871 0.0001865232 -0.0000760311 -0.0003491793 -0.0003270615 -0.0002616248 0.0005052294 0.0002880981 0.0001755720 0.0005443742 0.0012836042 -0.0003892429 -0.0076740451 0.0007761463 -0.0013939874 0.1452981982 0.1295127649 -0.1019933147 -0.0233991857 -0.0668262236 0.1715482190 -0.0916520880 0.1176229997 0.1024594095 -0.0240618674 0.0109989468 0.0138311253 -0.0136828541 -0.0123900525 -0.0059659673 0.0095106922 -0.0917726398 -0.0823639361 0.0644523173 0.0449555590 -0.0542718707 -0.0059154410 0.0048827659 -0.0011102197 0.0015077832 0.0007297267 -0.0000112217 -0.0019080024 0.0004538683 -0.0000242559 0.0059439312 -0.0005410625 -0.0003005734 -0.0023409892 -0.0005353145 0.0002975076 0.0011309941 0.0004075248 0.0010997425 -0.0006868480 -0.0008021726 0.0006403733 -0.0013460186 0.0000007915 -0.0018390230 0.0002502998 -0.0007485164 0.0011219763 0.0025589745 0.0016198448 0.0021385249 -0.0006371575 0.0002665168 -0.0007166655 -0.0003011359 -0.0003813585 -0.0007471954 0.0006468686 -0.0000159090 0.0020953057 0.0002923944 0.0001481283 -0.0011901257 -0.0019607816 -0.0017382285 -0.0026809900 -0.0656132784 0.0746117503 0.0873574577 0.0433032894 0.0107852095 -0.0220013091 -0.0032127784 -0.0234925268 -0.0059577421 -0.0141755942 -0.0260693238 0.0004933193 0.0151254013 0.0246325219 -0.0003270598 -0.0230382800 0.0097251502 0.0175619412 0.0179900523 0.0190007316 -0.0041606732 -0.0369006907 -0.0023996409 0.0158129172 0.0194603607 -0.0726547486 -0.0399858244 0.0769084067 -0.0309518628 -0.0571962194 0.0229675894 -0.0249069729 -0.0242541040 0.0367589908 -0.0092250274 -0.0318351727 -0.0187478294 -0.0243638812 0.0061072961 0.0423888945 -0.0778540430 -0.0194018910 -0.0488819916 0.1309140883 0.0436565681 -0.0225204434 0.0981915400 0.0238717078 0.1113233368 -0.0214986169 -0.0500529718 -0.0588202592 -0.0956453190 0.0109862923 0.1308110431 -0.0544677561 -0.0639308526 -0.0504540355 -0.1334845602 0.0016847764 -0.3032901288 0.2563624750 0.1645980094 -0.0551530181 0.3985709775 0.0970057058 -0.3603292527 0.2740621520 0.1869170497 -0.0412672835 0.3773586223 0.0740334905 -0.1113775544 0.0702982340 0.0579312110 0.0148815697 -0.0079183532 -0.0043295856 -0.0010826476 0.2339448518 0.0318258648 0.0019833888 0.0014040006 0.0008919388 0.0001851103 -0.0127801887 -0.0005849606 0.0083955836 0.0106610898 0.0047954216 -0.0036451486 -0.0032223752 -0.0009685886 -0.0007042423 -0.0002467245 0.0000946719 0.0008768987 0.0003708613 -0.0001223781 0.0005740203 0.0008857613 0.0006229939 0.0004181899 0.0003025982 -0.0000439317 -0.0028037169 -0.0002867375 0.0004440023 -0.0013529034 -0.0003092486 -0.0010077340 -0.0062346508 -0.0040988800 0.0013212609 -0.0005646386 0.0011665837 0.0026338592 -0.0006652507 -0.0019497902 -0.0023998596 -0.0069157558 -0.0040970003 -0.0007563463 0.0022922519 -0.0071551053 -0.0059303314 0.0047073639 0.0017614092 -0.0018382964 -0.0008014971 -0.0010211813 -0.0009348694 0.0000959493 0.0004317928 0.0020486855 0.0005357861 -0.0006368929 -0.0003933361 0.0280976834 0.0019148548 0.0079063891 0.0002414407 -0.0215758283 0.0028273809 0.0047166925 0.0186714516 -0.0056270050 0.0137466248 -0.0083990780 0.0000138956 -0.0069807099 -0.0022027345 -0.0068590334 -0.0073164339 0.0096532926 0.0080852701 0.0116931270 -0.0044496267 -0.0009591209 -0.0121205243 -0.0016006899 -0.0072279593 -0.0030758111 0.0082130795 0.0071594236 0.0317032979 -0.0088177826 0.0112542910 0.0288112509 -0.0224622392 -0.0139747013 0.0045923517 0.0003300310 0.0011876056 0.0347864805 -0.0043582257 0.0112278251 0.0270774698 -0.0211740771 -0.0083898418 -0.0015806641 -0.0005234119 0.0011690603 -0.0007937242 -0.0010126685 -0.0023333631 0.0020666642 0.0011809197 0.0008671025 -0.0023646363 -0.0007828667 0.0011271297 -0.0003554166 -0.0007818337 -0.0020903402 0.0060418217 0.0033544544 -0.0004136741 0.0046525383 0.0026952936 0.0047702451 0.0000882435 0.0001060323 0.0001991054 0.0072751453 0.0028313834 -0.0006684725 0.0047807288 0.0033955903 0.0044919577 -0.0011698294 0.0009544755 0.0017768632 -0.0033204995 -0.0011588065 -0.0028499935 -0.0000679971 -0.0001834564 -0.0004388804 -0.0002937680 -0.0000237752 0.0001447795 0.0055911117 0.0001306935 -0.0008574850 -0.0050989755 -0.0001909302 0.0009582551 -0.0005353630 -0.0019999707 0.0008505268 -0.0029652979 0.0028151127 -0.0005915314 0.0029747532 -0.0028644334 0.0007479983 0.0036620997 -0.0102730290 0.0033563337 -0.0012406995 -0.0014747785 0.0007555886 0.0035171003 0.0013729199 -0.0011339580 -0.0005640199 -0.0019548590 0.0010618626 -0.0024431875 -0.0079275506 0.0034051487 -0.0014173453 -0.0005947913 -0.0019231917 0.0002278158 0.0001003521 0.0001892023 0.0011199675 0.0015317919 0.0006252973 0.0000594059 -0.0023664832 0.0019307692 -0.0033446860 -0.0003600815 -0.0053245500 -0.0018539494 0.0037685758 -0.0057251012 0.0009714398 0.0001230474 0.0013772961 -0.0001501676 0.0014638802 -0.0013830813 -0.0029993023 -0.0015197897 -0.0032563025 -0.0019607238 -0.0017878070 -0.0015125862 0.0027573651 0.0019130256 -0.0031518563 0.0037016117 0.0157264170 -0.0131426888 -0.0070633522 -0.0265693089 0.0283694027 -0.0218445198 0.0235636085 0.0174933862 -0.0016464470 -0.0003711492 -0.0010238810 0.0143189051 0.0328531987 0.0011604592 0.0260509548 -0.0038850939 0.0238224742 -0.0276998046 0.0087615348 -0.0065940092 0.0642567911 -0.0588866850 0.0139260666 -0.0054612228 -0.0067563744 -0.0002964900 0.0143601804 -0.0030388223 0.0000910286 -0.0669297144 0.0125286363 0.0008662744 0.0434771835 0.0130935308 -0.0068339795 0.0048480052 -0.0024461332 0.0109333828 -0.0023991586 -0.0057557958 -0.0092277985 0.0054546501 -0.0013084815 0.0094311411 0.0095387081 0.0176564119 -0.0071487438 -0.0046221867 -0.0072788155 -0.0038854485 -0.0016049393 0.0013524759 -0.0028909447 -0.0077613289 -0.0058957895 0.0025571699 -0.0019520334 -0.0016786202 0.0000229149 0.0023757367 0.0015918316 -0.0014834377 0.0013428932 -0.0002817984 0.0015115247 -0.0033623251 0.0042053987 0.0042649528 0.0035965815 0.0052215459 0.0004173738 -0.0020409051 0.0005617059 0.0013724271 -0.0046632465 0.0022702530 0.0042510614 0.0007930619 -0.0046764023 -0.0019203005 0.0019773162 0.0012840493 -0.0007763486 0.0002184045 -0.0035677351 -0.0015148849 0.0016566408 0.0047940237 -0.0000345242 -0.0003523056 0.0104144004 0.0019624713 -0.0027326574 0.0037378046 0.0028258534 -0.0001158876 0.0124897808 0.0049373008 0.0034900571 -0.0018538068 -0.0032264978 0.0006632861 -0.0048340390 -0.0016649338 -0.0008863883 -0.0045184158 0.0028131419 -0.0078749714 0.0161007942 0.0061655515 -0.0041638353 0.0114540326 0.0034357715 0.0129526932 -0.0010882940 -0.0056153246 -0.0065026040 -0.0118463441 0.0011264432 0.0162851213 -0.0060608308 -0.0079046532 -0.0051291757 -0.0177149012 -0.0004346739 -0.0335776773 0.0305090213 0.0184171702 -0.0064053363 0.0522309029 0.0109278136 -0.0410467272 0.0325074712 0.0218646325 -0.0036226464 0.0485578360 0.0087920519 -0.0096088105 0.0114318463 0.0057415523 -0.0004198526 -0.0018962259 -0.0000478989 0.0020713583 0.0171748399 -0.0030197565 -0.0343329545 -0.0244495411 -0.0107659746 0.0000292633 -0.0006888324 -0.0000352341 -0.0002013814 0.0005067942 0.0006096413 0.0000305384 -0.0000711345 -0.0000556143 -0.0001117282 0.0000890141 0.0000130712 0.0005792316 0.0004766685 -0.0004016049 0.0004941979 -0.0003492042 -0.0003139044 0.0000093120 -0.0000974427 0.0000204245 0.0001339400 -0.0002025937 -0.0002722342 -0.0001417468 -0.0000324302 -0.0001060444 -0.0073883807 -0.0060666072 0.0025166203 -0.0023080381 0.0025359632 0.0051021397 0.0020649755 -0.0036389000 -0.0024577901 0.0023768610 0.0006180165 -0.0011210879 -0.0021535484 0.0075657483 0.0017238434 -0.0049877903 -0.0004333365 0.0013017512 0.0004562221 0.0002698564 -0.0003608830 -0.0002549354 0.0005147288 -0.0003722341 -0.0000675133 -0.0003175052 -0.0001277240 0.0021723205 0.0004402207 0.0009756458 0.0003517261 -0.0007427850 0.0010552969 -0.0001756121 0.0019988116 -0.0000192518 -0.1522512327 0.0918217803 -0.0034558647 0.0799788228 0.0272378951 0.0800911507 0.0896567830 -0.1152614287 -0.0952071546 -0.1455275153 0.0544797570 0.0092229804 0.1516662095 0.0150309301 0.0846937906 0.0209207020 -0.0821728091 -0.0755310575 -0.4365769211 0.0937251243 -0.1456195624 -0.3255236979 0.2502463551 0.1548971726 -0.0051732560 0.0029893699 0.0022649223 -0.4008603612 0.0455583060 -0.1317181849 -0.2959352495 0.2247710809 0.0856145605 0.0218291190 0.0063740196 -0.0184601832 0.0145247194 0.0161570286 0.0342111128 -0.0331701948 -0.0176519969 -0.0099447175 0.0345922257 0.0114616407 -0.0182580765 0.0056918102 0.0121150008 0.0288908646 -0.0878742227 -0.0442883219 0.0027011710 -0.0628405485 -0.0482335521 -0.0706419068 0.0012803619 0.0008762247 0.0008508588 -0.0944477205 -0.0441140018 0.0090082934 -0.0672252069 -0.0556259594 -0.0665581310 0.0073244040 -0.0114023456 -0.0149112176 0.0136576611 0.0038263957 0.0109255849 0.0002838117 0.0013976002 0.0023108654 0.0030337884 0.0000559669 -0.0017080060 -0.0517037995 -0.0050296487 0.0094330676 0.0503803555 0.0052761297 -0.0107817246 0.0036353104 0.0197942548 -0.0081962893 0.0288570698 -0.0273842848 0.0057432314 -0.0238876284 0.0278028214 -0.0076614470 -0.0342063734 0.0976485913 -0.0316929576 0.0117781020 0.0134946108 -0.0069546715 -0.0331667366 -0.0126751199 0.0105898203 0.0093845866 0.0178063618 -0.0103073554 0.0225238303 0.0743887467 -0.0315670497 0.0092197782 0.0023195869 0.0143553950 -0.0024912336 0.0006938087 -0.0038770306 -0.0051159216 -0.0090438718 -0.0014665070 -0.0016422825 0.0139105615 -0.0134547103 0.0182734885 0.0010762586 0.0307908437 0.0096465645 -0.0242023668 0.0341246503 -0.0043910987 -0.0011152322 -0.0058732697 0.0012354583 -0.0075299295 0.0077595186 0.0142378646 0.0067324258 0.0169231576 0.0081319890 0.0047351266 0.0089747589 0.0001196146 0.0001141486 -0.0002820139 0.0011851309 0.0007298158 -0.0007773785 -0.0001510334 -0.0012675958 0.0027967384 -0.0017735182 0.0013706591 0.0010659009 0.0000039317 -0.0001269186 -0.0007494954 0.0028441071 0.0016047353 -0.0017676736 0.0014697321 0.0052872919 0.0079433685 -0.0049210769 -0.0034511758 0.0050582030 -0.0313170535 -0.0030060340 0.0037329979 -0.0016003994 0.0160840719 -0.0040173287 0.0038857693 0.0119311040 -0.0047774488 0.0201086519 -0.0045415476 0.0061348444 -0.0132636890 0.0098941866 -0.0043796538 0.0322171000 0.0097148481 0.0352765950 -0.0476654697 -0.0377540905 -0.0329751791 0.0046013336 0.0114021438 0.0005524592 0.0703546894 0.0558836650 0.0273458855 0.0219475649 0.0111057712 -0.0041407398 -0.0036369044 0.0026590500 -0.0090096132 0.0018202430 0.0004390166 -0.0005052969 -0.0022883654 0.0011994597 -0.0001356016 0.0016690869 0.0006627255 -0.0011927223 0.0008732993 -0.0006858144 0.0010824200 0.0006482132 -0.0009468227 -0.0010367138 -0.0042675638 -0.0045552416 0.0040136379 0.0009275430 0.0019638787 -0.0001930598 0.0011186805 0.0011960290 -0.0003876641 -0.0009518904 -0.0007631796 0.0003185585 0.0010300099 -0.0012627637 -0.0011545904 -0.0010078780 0.0003816409 0.0007431126 0.0002094496 -0.0015191400 -0.0003592353 -0.0013314092 0.0001929781 0.0006633089 -0.0042702122 0.0006536362 0.0027748711 -0.0011103731 -0.0012295170 0.0004512333 -0.0003030425 -0.0002495405 0.0000968503 -0.0002916663 0.0005075443 0.0003801718 0.0010094909 -0.0004212706 -0.0008413236 0.0005582251 -0.0009340529 -0.0003955081 0.0003694353 -0.0005900442 -0.0002410163 -0.0006056284 -0.0000936449 0.0002399570 0.0002891259 0.0006410551 -0.0000454591 -0.0009337737 0.0003001056 0.0004515010 0.0001823809 0.0011411812 0.0000883599 0.0015974298 -0.0016294195 -0.0008068760 0.0003415304 -0.0030545297 -0.0004380557 0.0018720502 -0.0016020735 -0.0010474159 0.0000659294 -0.0029168983 -0.0004441882 0.0001861767 -0.0008948244 -0.0001934846 -0.0004513937 0.0009639781 0.0002387320 0.0016278712 -0.0077920337 -0.0013373971 -0.1482605123 -0.1036255653 -0.0550291712 -0.0003425982 -0.0000288820 -0.0005215663 -0.0004147166 -0.0003589434 -0.0000476237 0.0003735077 0.0003148388 0.0000552533 0.0000485475 -0.0001084144 -0.0000086909 0.0006521148 0.0004452389 -0.0002815031 0.0000154853 -0.0001137913 -0.0000864310 -0.0000243807 0.0000753916 -0.0000604551 0.0000341707 0.0000131856 -0.0000049467 0.0000182962 -0.0001587090 -0.0000954411 -0.0088921978 -0.0055025429 0.0023479829 -0.0025522563 0.0039273946 0.0041038020 0.0011655608 -0.0042029687 -0.0032548677 0.0007622490 0.0004851181 -0.0008605400 -0.0000701170 0.0012855054 0.0014918688 -0.0017102551 -0.0003099004 0.0006343422 -0.0004610534 -0.0002058046 0.0005599521 0.0002690373 -0.0005382880 0.0000446524 -0.0001741759 0.0002559007 0.0000126361 -0.0001182876 0.0003916590 0.0006054589 0.0002548328 0.0006683429 0.0004004289 -0.0003930267 0.0007078096 0.0002552289 0.0368239058 -0.0191740676 0.0012061616 -0.0152528462 -0.0072056126 -0.0172588244 -0.0217633245 0.0254598274 0.0202811738 0.0332266549 -0.0108201918 -0.0001993005 -0.0344872176 -0.0036871138 -0.0193511764 -0.0048491710 0.0177070857 0.0165588061 0.0910790050 -0.0198907116 0.0271828607 0.0708662635 -0.0560850043 -0.0360849066 0.0009829917 -0.0003917404 -0.0000957270 0.0879615886 -0.0101848803 0.0281569406 0.0662228807 -0.0492321107 -0.0204760288 0.0903171356 0.0261488825 -0.0738055630 0.0599882653 0.0673256103 0.1447287673 -0.1329302901 -0.0738195862 -0.0508705402 0.1464029959 0.0509067225 -0.0681753754 0.0148501419 0.0436137042 0.1144730883 -0.3672967478 -0.1790512676 0.0127065364 -0.2574495641 -0.1953079164 -0.2839716698 0.0052627354 0.0027593314 0.0025392573 -0.3900628408 -0.1782974774 0.0462883309 -0.2684932365 -0.2142594450 -0.2516391825 -0.0013681208 0.0022016469 0.0028788858 -0.0031784219 -0.0009075305 -0.0025760834 0.0014035085 0.0066073526 0.0108915973 0.0114206489 0.0001502977 -0.0065681520 0.0306654907 -0.0047817305 -0.0028148909 0.0056751655 0.0012669070 -0.0024066688 -0.0214584165 -0.0124528954 0.0082959547 -0.0072609889 0.0355532806 -0.0123826779 0.0714469745 -0.0235293664 -0.0020485015 0.0496834878 -0.0675465626 0.0174476011 -0.0243206115 0.0087694692 0.0015594082 0.0061684682 -0.0258394062 0.0085137799 0.0784672837 -0.0030149126 -0.0183600296 0.0410175784 0.0170552712 -0.0132860304 0.0160724578 0.0041242360 0.0213627419 -0.0376224823 -0.0109295988 -0.0455513407 0.0152339290 0.0035997050 0.0221842226 -0.0180093570 -0.0188785802 -0.0137706483 -0.0324652513 -0.0207427116 -0.0370389556 -0.0175312429 -0.0364065074 -0.0002740209 0.0061751950 -0.0203366569 0.0255097291 0.0259798045 0.0527812384 -0.0018119516 -0.0536286501 -0.0506927962 -0.0391130963 -0.0630168085 -0.1283851489 0.0048419060 -0.0001940140 0.0001579837 -0.0000635355 0.0028699668 -0.0016293582 0.0010136768 0.0008223392 0.0014499463 0.0018605486 -0.0005885842 -0.0015341490 -0.0010958724 -0.0001567569 -0.0004242978 -0.0015769679 0.0098183789 0.0050378765 -0.0055664739 0.0070006753 0.0099805399 0.0201115432 -0.0104437134 -0.0081426857 0.0114054686 0.0323299112 0.1105392736 -0.0434771200 -0.0782652329 -0.0541786935 0.0270374022 0.0089658957 -0.0545284223 0.0187546010 0.0475873963 0.0543751868 -0.0246602396 0.0110497512 -0.1081599546 0.0423399956 -0.0306262444 -0.1201834837 0.0647050347 -0.0301626310 0.0495281933 -0.0775306441 -0.0166902042 -0.0590711671 0.0320195339 0.0148210242 0.1184811314 -0.1080802436 0.0426731065 -0.0420441573 0.0998605724 0.0019737921 0.0057743191 -0.0070635961 -0.0009018290 0.0045993771 -0.0030961436 -0.0017116028 0.0042575313 0.0004980769 0.0012711392 -0.0005147661 -0.0007905028 0.0003595171 -0.0013126298 0.0001112190 0.0010131337 -0.0005360418 -0.0011034987 -0.0004852756 -0.0007887933 0.0003300750 0.0002525002 0.0000815443 -0.0001640122 0.0000396677 -0.0003855960 -0.0001825513 -0.0001486274 0.0003236642 0.0002297995 -0.0000805861 -0.0002397841 -0.0000442800 0.0000513920 0.0006183490 0.0001748352 -0.0000406819 -0.0004548576 -0.0001439245 -0.0003357811 -0.0007744521 -0.0004388133 -0.0002886383 -0.0002179723 -0.0000261042 0.0001262696 -0.0012525594 -0.0004571382 -0.0002950360 0.0003132942 0.0003226364 0.0005726493 -0.0007312958 -0.0002637241 -0.0018699514 0.0011055571 0.0004719742 -0.0005537723 0.0008587619 0.0003168895 -0.0002797930 0.0004929771 0.0001945904 0.0004951704 0.0000686573 -0.0001835298 -0.0002603667 -0.0006228848 0.0000104360 0.0007647573 -0.0002669109 -0.0003444174 -0.0001330460 -0.0008784045 -0.0000676381 -0.0011584417 0.0012170456 0.0005869131 -0.0001296639 0.0030264322 0.0007664108 -0.0018934750 0.0015545236 0.0007961698 -0.0000348827 0.0022333299 0.0003610975 -0.0002411192 0.0006514346 0.0002449725 -0.0000174395 0.0001428008 -0.0000128759 0.0006631870 0.0001238265 0.0008443244 -0.0319291106 -0.0298952666 0.0078927327 -0.0001103620 0.0013491508 0.0004996749 0.0003190948 -0.0010420021 -0.0008043034 -0.0001218232 0.0000310378 0.0000252775 0.0001372375 0.0000434519 0.0000282858 -0.0001545960 0.0000980856 0.0001386880 -0.0000985503 0.0007330886 0.0002629802 -0.0000447642 0.0000622706 -0.0000428679 -0.0001415878 0.0002119807 0.0001751878 -0.0000799664 0.0001874885 0.0001457679 0.0015382434 -0.0006762767 0.0008956509 0.0005952610 0.0001770433 -0.0020690893 -0.0009641733 -0.0007664026 -0.0009528373 -0.0058547178 -0.0034285414 0.0005349481 0.0026410571 -0.0092778553 -0.0019627601 0.0036126806 0.0019928692 -0.0019978733 -0.0005456218 -0.0003780734 0.0002351851 0.0003502044 -0.0007952113 0.0004886698 0.0003283972 0.0004016799 0.0001967641 0.0001415440 -0.0008781705 -0.0011850834 -0.0003523567 -0.0009503434 -0.0003202871 0.0004204643 -0.0013367602 -0.0002733467 0.0099151718 -0.0201122765 0.0017671877 -0.0105968232 0.0012595103 -0.0077093325 -0.0049432737 0.0126056931 0.0115706897 0.0084310508 -0.0119408012 -0.0109903724 -0.0130945248 0.0038488989 -0.0027188030 0.0057667443 0.0038778452 0.0044638498 0.0448100713 -0.0115937682 0.0240995008 0.0276512247 -0.0171830695 -0.0058070611 -0.0005741862 -0.0011431092 -0.0021039146 0.0322270969 0.0001728032 0.0181550065 0.0121631972 -0.0105616449 0.0074652979 -0.0000059141 -0.0030014790 -0.0176030521 0.0210355414 0.0148408906 0.0150386946 -0.0355521191 -0.0104567276 0.0190972801 0.0270215138 0.0063515001 -0.0251750598 0.0138463871 0.0171965729 0.0243558471 -0.0252905951 -0.0254334128 -0.0134492426 -0.0348816172 -0.0364653196 -0.0668448962 -0.0005937719 0.0033997720 0.0041693645 -0.0607260070 -0.0341215995 -0.0085582537 -0.0564179243 -0.0622743378 -0.0754555104 -0.0012684264 0.0018713799 0.0025086051 0.0008305342 0.0002139645 0.0006193826 -0.0004921410 -0.0018335407 -0.0025658704 0.0054905955 -0.0000283479 -0.0028203214 -0.0851634164 0.0393124536 -0.0031128569 -0.1103131210 -0.0248969106 0.0282672047 0.0872478252 0.0281412745 -0.0249726213 -0.0053018136 -0.1121598341 0.0437437166 -0.2659626625 0.0642072043 0.0161788762 -0.1580883576 0.1510513502 -0.0309448643 0.0828606839 -0.0517959303 0.0031465795 0.0195876073 0.1209259188 -0.0484585020 -0.3150830346 -0.0138588579 0.0821869831 -0.1863366580 -0.1552492417 0.0883980594 0.0761955902 0.0045455892 0.1180578630 0.0672244594 0.0533436566 0.0508641506 -0.0654159328 -0.0769170072 -0.0459645365 0.0106565204 0.1326289434 -0.0864321564 0.1813214530 0.0324336903 0.2851684402 0.0978389902 -0.1336034930 0.2545060287 -0.0503611985 0.0168092643 -0.0901194087 -0.0248373759 -0.1291868822 0.0637492056 0.1982851526 0.1265004798 0.1963797979 0.1467371398 0.2040858879 0.0644450701 -0.0001593828 -0.0001055263 -0.0000043728 0.0001357406 -0.0020595793 0.0014173481 0.0007304460 0.0016848011 -0.0004949496 0.0004549581 -0.0018306823 -0.0013417394 -0.0000138959 -0.0000739632 -0.0003430114 0.0009367542 -0.0017230516 -0.0013744081 -0.0007331684 0.0027078262 0.0024804818 0.0009997515 -0.0028994607 0.0032507670 0.0649223460 0.0927970714 -0.0392073294 -0.0516992871 -0.0547974937 0.0225391110 -0.0114428224 -0.0486851454 0.0189015174 0.0507773128 0.1280098788 -0.0774411928 0.0158115931 -0.1115305563 0.0427121187 0.0265976857 0.0884831471 -0.0387125737 0.0017032702 -0.1050243709 0.0976429736 -0.0034904403 0.0327319876 -0.0338980768 0.0193413969 -0.0591029591 0.0872994965 -0.0059683622 0.0337015245 -0.0483674672 -0.0014336089 -0.0056099304 0.0035588499 -0.0007104682 0.0070796703 -0.0027640917 0.0030492565 0.0004077288 0.0013602674 -0.0020474282 -0.0009336295 0.0011152300 -0.0016339282 0.0004971849 -0.0030199210 -0.0091030655 0.0082881491 0.0114365872 -0.0025227160 -0.0110466917 -0.0021869644 0.0051883179 -0.0027310096 -0.0040715574 0.0036881707 -0.0088322226 -0.0059984297 0.0001744647 0.0112545147 0.0037122915 -0.0083974711 -0.0008510575 0.0048468159 0.0034082533 0.0094227074 0.0014384741 -0.0097485465 -0.0099746812 0.0016869565 0.0018037730 -0.0320439501 -0.0110832137 0.0166524981 -0.0121210005 -0.0143073951 0.0048147617 -0.0233081311 -0.0122595117 0.0002898000 0.0014961636 0.0001110577 -0.0023308303 0.0028684750 0.0024171677 0.0049156221 -0.0023666924 -0.0052447051 0.0026258772 -0.0035010839 -0.0017532246 0.0014851063 -0.0019539248 -0.0009178717 -0.0020597442 -0.0005770083 0.0007698772 0.0011077185 0.0020743427 -0.0001888306 -0.0034739789 0.0011926336 0.0016796544 0.0003992526 0.0039731938 0.0004202562 0.0043181533 -0.0051189815 -0.0025144821 0.0010402339 -0.0113676082 -0.0022895422 0.0073188624 -0.0061421995 -0.0039831516 -0.0000379688 -0.0099432451 -0.0014584890 0.0001981242 -0.0034254349 -0.0005744914 0.0046442197 0.0015293143 -0.0006814064 -0.0027109502 0.0403112604 0.0073469404 -0.0109378762 -0.0024481648 -0.0159899855 -0.0002912438 0.0000960375 0.0002489564 0.0013859653 -0.0000790150 -0.0006688951 -0.0004665181 -0.0002737076 0.0000292547 0.0000326680 0.0000087375 -0.0000985290 -0.0001935679 -0.0004582357 0.0003734669 -0.0002925251 0.0011168692 0.0002842156 0.0000261131 0.0000905650 0.0001148113 -0.0005469769 0.0002996288 0.0004661690 -0.0000103805 0.0001171826 0.0000896922 0.0034623185 0.0044553793 -0.0021370044 0.0012997883 -0.0005092832 -0.0037794164 -0.0021421226 0.0021993970 0.0011634203 -0.0064208996 -0.0033182384 0.0031192511 0.0029228083 -0.0118876280 -0.0043767490 0.0074371897 0.0003862846 -0.0017209630 -0.0003187618 -0.0003232603 -0.0001983491 0.0002134797 -0.0003078527 0.0000325358 0.0000304988 0.0000507299 0.0000671437 0.0003031144 -0.0007492851 -0.0009959956 -0.0005982062 -0.0017938629 -0.0012056211 0.0009132133 -0.0012351340 -0.0007223411 -0.0183992324 -0.0028911453 0.0005543587 -0.0031238791 0.0063961043 0.0031966698 0.0124114455 -0.0062800940 -0.0026749873 -0.0146720968 -0.0033668672 -0.0095749815 0.0141459291 0.0043890054 0.0100650179 0.0049017227 -0.0058280618 -0.0060684698 -0.0130332027 0.0018068292 0.0080126488 -0.0192280584 0.0210060624 0.0189004731 -0.0022518628 -0.0005695090 -0.0018372407 -0.0286444608 0.0052955303 -0.0038839184 -0.0287615113 0.0174069304 0.0164611586 0.0138529244 0.0050781086 -0.0025013090 0.0000598110 0.0042961037 0.0180222071 -0.0012732800 -0.0069805946 -0.0227006747 0.0110420804 0.0065456142 0.0055049000 -0.0086873383 -0.0051193311 0.0023893471 -0.0464332983 -0.0136990048 0.0082623829 -0.0232943967 -0.0117479123 -0.0097537541 0.0005332005 -0.0021927526 -0.0027264134 -0.0299811137 -0.0088181371 0.0159168967 -0.0089876739 0.0049162610 0.0087334211 -0.0000358034 -0.0000073095 -0.0000003559 0.0032569558 0.0009400856 0.0026023111 0.0006691438 0.0027130459 0.0042014305 -0.0011238594 0.0000345744 0.0004621532 -0.0933177707 0.0073444038 0.0109313871 -0.1335235143 -0.0143618534 0.0335221863 0.0891502491 0.0520721614 -0.0347578831 0.0065527607 -0.1606702990 0.0603895869 -0.2788500152 0.0932220675 0.0075369356 -0.2011168291 0.2028427509 -0.0438299214 0.0758291780 -0.0712255070 0.0114958215 0.0438129225 0.1679886101 -0.0704008849 -0.3440269845 -0.0339342964 0.0955275004 -0.2294746303 -0.2024658394 0.1136194634 -0.0643742836 -0.0152748156 -0.0983708399 -0.0451536652 -0.0122384475 -0.0548822076 0.0462104409 0.0692681855 0.0200690543 -0.0029287315 -0.1301038931 0.0968403608 -0.1434452081 -0.0109432805 -0.2318920694 -0.0849274100 0.1260364501 -0.2294182325 0.0318545316 -0.0322498488 0.0748403739 0.0330782698 0.1358004674 -0.0564215725 -0.1530001325 -0.1170737459 -0.1373257649 -0.1375444586 -0.1982819724 -0.0545162610 0.0001220022 0.0000592124 -0.0000153780 -0.0008096006 -0.0004621107 0.0004351549 -0.0001082210 -0.0004147557 -0.0003458302 -0.0003108856 -0.0003254124 -0.0002882322 -0.0000186310 -0.0002175506 0.0002212190 0.0012013772 0.0038794778 0.0007785770 0.0030111855 -0.0029498071 -0.0000818747 -0.0011283846 0.0025532794 -0.0033592333 -0.0003042598 0.0076345574 -0.0024826096 -0.0079851909 -0.0017071137 0.0013823746 0.0022866916 -0.0023412669 0.0005799581 0.0054944342 0.0047889122 -0.0034270502 -0.0060403114 -0.0082953774 0.0034285682 -0.0013812559 0.0054199891 -0.0069558022 0.0009498679 -0.0036710517 0.0053469093 0.0017913894 0.0021300316 0.0005076984 -0.0009378548 -0.0047968204 0.0037141303 -0.0039338442 0.0001771691 -0.0055308302 0.0025863314 -0.0020470213 0.0029434425 0.0036654244 0.0030517991 0.0010061623 -0.0014848927 0.0020499370 -0.0071727333 -0.0020849832 -0.0021388199 0.0040243194 0.0072411785 0.0023301741 0.0087179138 0.1293462635 -0.1153890600 -0.1586833693 0.0614479136 0.1588071939 0.0200883227 -0.0792134810 0.0200212742 0.0542029167 -0.0438561943 0.1211396604 0.0778625664 0.0050822866 -0.1387780691 -0.0509252504 0.1074206360 0.0215997683 -0.0581807109 -0.0439721605 -0.1363227194 -0.0239084387 0.1258557640 0.1431935049 -0.0160996858 -0.0085104779 0.4194069336 0.1470451384 -0.1921550624 0.1593166982 0.1724113579 -0.0626508547 0.3174062323 0.1636979132 -0.0000703393 -0.0201311183 -0.0052425433 0.0221784150 -0.0325800843 -0.0240592972 -0.0560145429 0.0238136252 0.0560188079 -0.0254071951 0.0339164862 0.0172985786 -0.0144002610 0.0194874629 0.0090074968 0.0169607249 0.0079512712 -0.0058650858 -0.0109440474 -0.0175662131 0.0021269500 0.0340220548 -0.0132498214 -0.0165475203 -0.0027381055 -0.0402998502 -0.0047842367 -0.0340834641 0.0454433137 0.0203095969 -0.0095078787 0.1113450139 0.0240367965 -0.0693259414 0.0569297810 0.0364166971 0.0019522931 0.0946528815 0.0133254523 -0.0027640371 0.0330634097 0.0060512962 -0.0566767269 -0.0259981032 0.0061810401 -0.0040304555 -0.5493595882 -0.0520751855 0.0005343662 0.0011180774 0.0001305905 -0.0011226093 0.0071616097 0.0044906728 0.0029400590 -0.0054888541 -0.0045912719 -0.0014955466 -0.0002965800 0.0000867533 0.0005463774 0.0003269936 -0.0003395010 -0.0007728234 -0.0009774365 0.0002494152 -0.0011217683 -0.0002154699 0.0001839314 -0.0002157872 -0.0001736629 0.0002684631 -0.0009194588 0.0009595819 0.0007566737 -0.0006916370 0.0010797756 0.0007995748 0.0068953233 0.0094740274 -0.0048634485 0.0012920340 -0.0030327234 -0.0025844883 0.0005758198 0.0056224810 0.0052644395 0.0006798970 0.0007579939 0.0042139397 -0.0001928123 -0.0057452210 -0.0055361772 0.0120072125 0.0016177051 -0.0023681029 0.0008033317 0.0004647960 -0.0008506739 -0.0001832025 -0.0000065174 -0.0002005172 0.0009740972 0.0006326438 0.0007643410 0.0036174511 -0.0031734523 -0.0041013040 -0.0021744158 -0.0057763233 -0.0016459498 0.0034043256 -0.0044618832 -0.0025205109 0.0034600737 -0.0040637030 -0.0007025824 -0.0022268162 -0.0005491998 -0.0021758448 -0.0029453666 0.0036432160 0.0026565465 0.0042077813 -0.0015242654 -0.0001347594 -0.0066069841 0.0001894218 -0.0028160524 0.0014796169 0.0014750550 0.0020500787 0.0243014716 -0.0024404769 0.0093146627 0.0084471173 -0.0082899455 -0.0020836109 0.0025475576 0.0002905183 0.0011030211 0.0129872172 -0.0008242003 0.0051677043 0.0071554871 -0.0042299259 -0.0001111259 0.0009204071 0.0004534680 0.0002508341 -0.0008883471 -0.0004640433 -0.0000040064 -0.0000993916 -0.0004474373 -0.0014404166 -0.0014167885 -0.0004190264 0.0009701993 0.0000061457 -0.0004587231 -0.0009144842 -0.0002861346 0.0004032255 0.0005270895 0.0005610203 0.0014817091 0.0023012084 0.0069511485 0.0011631357 -0.0010811662 0.0036450958 0.0010836817 -0.0000841801 0.0022408422 0.0033894320 0.0023981577 -0.0005411189 0.0003749131 0.0006197957 -0.0017604665 -0.0005689396 -0.0014551943 -0.0007577756 -0.0007636454 -0.0011566524 -0.0044999687 0.0001121813 0.0022807091 -0.0048011332 0.0009885178 0.0003040908 -0.0062642007 -0.0014045816 0.0018966262 0.0032340816 0.0024396982 -0.0014762117 0.0007668433 -0.0072351611 0.0026405571 -0.0111899057 0.0040872857 0.0001177946 -0.0082655604 0.0086240060 -0.0019720707 0.0026472201 -0.0030219724 0.0005822264 0.0022078575 0.0073557552 -0.0031386678 -0.0141766675 -0.0015707509 0.0039341289 -0.0093015579 -0.0082377722 0.0046011624 -0.0024986324 -0.0000978033 -0.0043627976 -0.0031491305 -0.0013567625 -0.0033836425 0.0019241069 0.0028960163 0.0008535613 -0.0002990952 -0.0058524282 0.0040964808 -0.0064808770 -0.0007654659 -0.0104020460 -0.0036415605 0.0044511635 -0.0092155074 0.0010573347 -0.0019724480 0.0032196748 0.0021208236 0.0068849290 -0.0021800950 -0.0067329888 -0.0056594334 -0.0056789080 -0.0065217013 -0.0102386017 -0.0019748835 -0.0000540140 -0.0013077814 0.0003158937 -0.0075498039 0.0008894319 -0.0007729853 0.0009510946 0.0034580556 -0.0086405196 0.0053121610 -0.0007723387 -0.0007633544 0.0004282665 0.0013583454 -0.0021723773 -0.0035252888 -0.0200247634 -0.0067078115 -0.0096867896 0.0090622554 0.0016420487 0.0091741261 -0.0139277108 0.0181116976 -0.0002820790 -0.0001396320 -0.0002508725 -0.0017398633 0.0001922627 0.0002391408 0.0009825893 -0.0001021871 -0.0000936561 -0.0002315782 0.0003858021 -0.0000512687 0.0002951686 -0.0005313414 0.0004290804 0.0011302511 -0.0016793655 0.0035030699 -0.0006500775 -0.0001145808 -0.0008636005 -0.0018818330 -0.0010391466 -0.0015905891 0.0017501881 0.0023127189 -0.0004027493 0.0038874579 0.0016311787 0.0049973342 -0.0010808028 0.0005209665 -0.0023189825 -0.0002725540 -0.0012384737 -0.0018260377 -0.0003406775 -0.0010473173 0.0067667290 0.0028479492 0.0008928824 -0.0052295676 -0.0036546179 0.0002764432 -0.0080706421 -0.2688659287 0.2000421731 0.3228228542 0.0960407981 0.0887666440 -0.0240557751 -0.0505578758 -0.0353599214 0.0184468914 -0.0192378125 0.0424601457 0.0301412768 0.0292328374 -0.0046098211 -0.0190608179 0.0200637071 0.0327175816 -0.0009517005 -0.0014301944 -0.0642078718 -0.0230868897 -0.0187100254 0.0376171936 0.0219079730 0.0333571241 0.0440424458 -0.0087514640 0.0090454983 0.0455461587 0.0113298582 -0.0031139888 0.1341310580 0.0607279198 0.0950750136 -0.0609737608 -0.0952666626 -0.1186876221 0.1035061464 0.0646571035 0.3009284504 -0.2187202866 -0.0723670617 0.0402046102 -0.0479121343 -0.0157065901 0.0320537510 -0.0049190574 -0.0146487512 0.0017972099 -0.0207454813 -0.0053338311 0.0058804117 0.0253217738 -0.0002909742 -0.0339250404 0.0035887480 0.0145659958 -0.0135322934 0.0345087195 0.0096595895 -0.0163176506 -0.0124551810 0.0196014071 0.0095166537 -0.1291815921 -0.0120271532 0.0401010281 -0.0490601176 -0.0214839964 -0.0200509212 -0.0757516186 -0.0004585111 -0.0377385138 -0.0543470269 0.0117641468 0.0029142959 -0.0199694867 -0.0042320461 -0.0336096606 0.1319304237 0.0579138552 -0.0014228389 -0.0005870051 0.0015313219 0.0001340515 -0.2332003602 -0.1048081311 0.0967608909 0.2800209306 0.1429802788 -0.0706273518 -0.0700595336 -0.0157560316 -0.0083603906 -0.0045089661 0.0011380348 0.0063704200 0.0024809794 -0.0000143449 0.0064297000 0.0025319656 -0.0013169540 0.0062713773 0.0037035487 0.0003314454 -0.0089975130 -0.0269853044 -0.0110014769 0.0104928428 -0.0060874667 -0.0089774919 -0.0040292324 -0.0055338626 0.0002882211 0.0157955939 -0.0238018314 0.0026602934 -0.0150765797 0.0112158290 -0.0033762340 0.0045931322 0.0030784089 0.0123673625 -0.0017683848 0.0241172643 -0.0336710769 0.0012394941 -0.0114291968 0.0077429111 -0.0041565106 -0.0078061604 -0.0079708053 -0.0023665971 0.0155398252 0.0168607868 -0.0033297504 -0.0127989699 -0.0085905170 0.0557767430 0.0523720355 0.0721946662 0.0101282906 -0.0561899706 -0.0288090145 0.0157665445 0.0964329000 -0.0106734353 -0.0004959009 0.0031065429 0.0030297938 -0.0010044175 -0.0004005622 -0.0007879413 0.0001251485 0.0011640874 0.0016676244 -0.0011758988 -0.0013724465 -0.0021771813 0.0015648262 0.0008497777 0.0014360454 0.0013332785 -0.0027503975 -0.0025892322 0.0009285430 0.0006833117 -0.0025406654 -0.0001877884 0.0036829748 0.0000920952 -0.0019298918 -0.0060244790 -0.0095027526 -0.0033016152 -0.0004948196 0.0012078698 -0.0054727220 0.0024487464 0.0017521874 0.0012253744 0.0004529155 -0.0002523365 -0.0004124777 -0.0003269119 -0.0002126105 -0.0011473683 -0.0005451762 -0.0002241737 -0.0015962212 -0.0005741313 -0.0001224127 0.0009199930 0.0004243140 -0.0007466294 -0.0018907145 0.0022718395 -0.0001446333 0.0034331635 -0.0014303933 0.0036089913 0.0086656667 0.0010990810 -0.0014983774 0.0066595967 -0.0013434725 -0.0005064884 0.0017253423 -0.0000943855 -0.0002668576 -0.0013995665 0.0034343781 0.0043217662 0.0032156396 0.0015796066 0.0036728551 -0.0010801915 -0.0006248731 -0.0015502345 -0.0054437915 0.0001555937 0.0027406624 -0.0006638630 0.0002225476 0.0000511534 0.0001984120 -0.0001673616 0.0000369256 -0.0000499755 0.0001553348 -0.0000845780 0.0003061769 -0.0003314852 0.0000569832 -0.0003007173 0.0003066822 0.0001844772 -0.0001974155 0.0007275835 -0.0000705303 0.0001325707 0.0000630692 -0.0000931181 -0.0001620641 0.0000162340 0.0000056483 -0.0002565475 0.0002997836 0.0003447850 0.0001035558 0.0005416891 -0.0000182612 -0.0000590803 -0.0004689067 0.0004247889 0.0011633092 0.0009346941 0.0007925975 -0.0001718964 -0.0001562844 -0.0003062882 0.0002085424 0.0003513186 -0.0000352035 0.0001759206 0.0006344556 0.0011630317 -0.0001649884 0.0008260308 0.0000216966 0.0002870487 0.0004841894 -0.0000772762 -0.0006760139 -0.0011574080 -0.0002051393 0.0001756183 0.0009607352 0.0006281003 0.0003668859 0.0019234324 -0.0000682786 0.0107084160 0.0268816364 -0.0053231058 0.0843538678 0.1423849257 -0.0971249725 -0.0564150426 -0.1324479814 0.0836964064 -0.0148617119 0.1269945389 0.0783284700 -0.0099925635 0.0170167379 -0.0015300603 0.0734571688 0.1535586347 0.0081342064 0.1617354226 0.0019719466 0.1554357706 -0.2780757466 0.0469532502 0.0251238664 -0.0609847290 -0.1520007351 0.0669454976 -0.1048680835 0.1229762518 -0.0210676683 0.0552061667 0.0934391665 -0.0423312787 0.1218219720 -0.2106592693 0.0944698581 -0.1459285300 0.2197882148 -0.0814934699 -0.0320498434 -0.0698867985 0.0082562174 0.0150561578 0.0949356118 -0.0353724742 -0.0102689655 -0.0174539754 0.0023719097 0.0129655724 0.0343085824 -0.0177902886 0.0039245817 -0.0118518527 0.0188622125 0.0017111123 0.0049240388 -0.0003578108 0.0180108452 -0.0055925786 0.0011763050 -0.0007666811 -0.0005891132 0.0009217230 -0.0002272199 -0.0000971396 -0.0007982824 -0.0000528293 0.0001445384 -0.0009159929 -0.0050781608 0.0052937853 0.0072693448 0.0010676875 0.0020781756 0.0000500361 -0.0014142605 -0.0002437793 0.0007737166 0.0000847606 0.0004981060 0.0001865337 0.0008217242 -0.0007322736 -0.0007516503 0.0017285001 -0.0005249829 -0.0012666525 -0.0005376084 0.0005407740 0.0005195765 -0.0016741831 0.0003865371 0.0011599442 0.0008586847 0.0010485072 -0.0002862355 -0.0022794811 0.0011693297 0.0017875939 -0.0004962424 0.0000603140 0.0006633946 0.0032541996 -0.0014463755 -0.0032935216 -0.0032286777 0.0017181074 0.0029761511 0.0027283492 -0.0028719674 -0.0030585716 -0.0024008101 -0.0017746860 0.0008540124 0.0044091514 0.0008642162 -0.0017364317 0.0038668216 -0.0020850761 -0.0019334855 0.0016086010 0.0007699157 -0.0007298446 -0.0044728809 0.0015488676 0.0018293164 -0.0022572721 0.0013562469 0.0011754016 -0.0039387669 0.0027965646 0.0021656699 0.0025611876 -0.0090725630 -0.0002355934 0.0049802752 -0.0050135554 0.0025177559 -0.0028132769 -0.0022802338 0.0009112515 -0.0038126672 -0.0043879452 0.0007504402 0.0001872262 0.0001010144 -0.0000974976 0.0004907455 0.0017227032 0.0010118660 0.0019640958 -0.0050963142 -0.0136306992 0.0000214956 0.0003658416 0.0002173178 0.0000385776 -0.0003870974 -0.0003159192 0.0000207817 0.0000332097 0.0000180730 -0.0000534761 0.0000243209 0.0000370929 -0.0000031033 0.0000143718 -0.0001096128 -0.0004468792 -0.0002184118 -0.0005136846 -0.0000755545 -0.0001021660 0.0000670125 -0.0000748335 0.0000344891 0.0000694092 -0.0000489067 -0.0000071589 -0.0000152843 -0.0000660829 -0.0001991159 0.0000683148 -0.0001261647 -0.0003203356 0.0007428471 0.0005159650 0.0001211969 0.0002695268 0.0057146524 0.0041222499 0.0043912464 -0.0014736935 0.0040480989 -0.0006515043 0.0020746686 -0.0041276569 0.0022570188 0.0011776736 0.0008467675 -0.0011512899 -0.0005414703 0.0009680095 -0.0002168683 0.0006557816 -0.0009162219 -0.0002098665 0.0005136481 0.0002179792 0.0004084971 -0.0000007900 -0.0002046911 0.0000864201 0.0001454414 0.0004397688 -0.0001459586 -0.0141318139 -0.0421797956 -0.0687745187 0.0363242127 0.0171688922 0.0426278199 0.0138800572 -0.0535479895 -0.0557387622 0.0298906475 0.0718260893 0.0980671477 -0.0380106346 -0.0311153786 -0.0509355197 -0.0219026465 0.0484922225 0.0441254121 -0.0762814696 0.0377165009 -0.0087076586 -0.0749206671 0.0189006641 -0.0079674877 0.0142157250 0.0299547199 0.0537953961 0.0565308198 -0.0357028323 -0.0232678126 0.0813952325 -0.0420316684 -0.0142017570 -0.0110386177 -0.0037234199 0.0063697479 0.0032766176 -0.0014888473 -0.0116299132 -0.0113106023 0.0010637653 0.0217032999 0.0121252062 0.0028154781 -0.0107100095 0.0000792956 0.0037477642 0.0106173601 0.0155198573 0.0067512752 0.0012080826 0.0112427717 0.0037008167 -0.0034159720 -0.0043005462 0.0039329211 0.0081336764 -0.0128972719 -0.0082267245 -0.0062784458 -0.0126417551 -0.0102208766 -0.0060269602 0.0111829379 -0.0203612096 -0.0287394800 -0.0258226283 -0.0098276093 -0.0246536203 -0.0003422108 -0.0033223925 -0.0054420530 0.0049587185 -0.0002837264 -0.0030359327 -0.0013944834 -0.2781160313 0.1125103236 -0.0074501780 0.2864621894 -0.1188224252 -0.0912170131 0.1390354817 -0.0395358560 0.0983778453 -0.2475901033 0.0789072172 0.1379847393 0.1359644834 -0.0761473948 -0.1411921460 0.2074119807 -0.0553222797 -0.1118815437 -0.1326107314 0.0713732801 0.1364865883 0.2364017444 -0.1128078944 0.1421922331 -0.1817002200 0.0396205691 -0.1738266792 -0.2138300415 0.1066052469 -0.0082212193 -0.0493833594 0.0320399530 0.0177532607 0.0471532439 -0.0160690262 -0.0086530178 0.0172446501 -0.0276305874 0.0068292659 -0.0304843751 0.0348835610 0.0283559148 0.0368836332 0.0165976940 -0.0099143180 0.0300955318 -0.0378674133 -0.0143144617 -0.0224692487 -0.0034775425 0.0155955994 0.0371682534 -0.0055006639 0.0135067566 -0.0130734454 0.0301020661 -0.0168173189 -0.0296775397 -0.0031246594 -0.0000151112 0.0000206657 -0.0000650801 0.0001664875 -0.0006943227 0.0005115079 0.0001678903 0.0000854854 0.0004530758 -0.0004537886 -0.0004487808 -0.0002941682 -0.0001305674 0.0000278311 -0.0001142743 0.0007445805 -0.0004813581 -0.0007947418 0.0004973346 0.0001727879 0.0009927078 0.0007999111 -0.0009263364 0.0011121101 0.0328368903 0.0223069777 -0.0121390482 0.0607245301 -0.0318689734 0.0012489721 -0.0379690631 -0.0183496593 0.0111874651 -0.0340240916 -0.0150878484 0.0026915620 0.0224888653 -0.0151611919 0.0083394642 -0.1065346688 -0.1844169044 0.0145893497 0.0919707762 0.1740780272 -0.0197683039 0.0694052843 -0.0572467691 0.1457585865 -0.0455443185 0.1096940047 -0.1630005014 -0.1863759402 -0.1522176139 -0.0815214730 0.0109317513 0.0036569726 0.0074841124 -0.0051602833 -0.0037804198 0.0002382125 -0.0014975909 0.0014207163 -0.0000715683 0.0008334440 0.0001795183 -0.0002893662 0.0000849120 -0.0002890525 0.0005289833 0.0200134748 -0.0205220679 -0.0232251185 -0.0067426008 -0.0091128710 -0.0004359745 0.0093460033 0.0039183697 -0.0043076684 -0.0045246483 -0.0063786596 0.0003462191 -0.0055534123 0.0015904162 0.0039282092 -0.0092898085 0.0013599470 0.0063291761 0.0039036899 0.0007241156 -0.0023272407 0.0115421877 -0.0022738971 -0.0074465913 -0.0061824469 -0.0029980660 0.0031958855 0.0034437839 -0.0041582999 -0.0045250215 0.0049650041 -0.0046374206 -0.0035252808 -0.0144224611 0.0063435235 0.0146095837 0.0149325609 -0.0065739436 -0.0145029426 -0.0104279650 0.0126645874 0.0195270639 0.0041894735 0.0068949350 -0.0010113968 -0.0112997999 -0.0042793165 0.0042117590 -0.0075541379 0.0030782627 0.0037071892 -0.0037732167 -0.0041131413 0.0011357327 0.0096813936 -0.0011805890 -0.0043396627 0.0054083701 0.0002159163 -0.0022862878 0.0074238839 -0.0064833617 -0.0039566676 -0.0037055827 0.0156263454 0.0043058896 -0.0061021230 0.0104074656 0.0024871235 0.0064243405 0.0016447078 -0.0024726004 0.0123787828 0.0106624367 -0.0034498010 -0.0017065890 0.0009966392 0.0005527459 0.0013121254 -0.0230940566 -0.0039606373 0.0475017316 -0.0072497590 -0.0808558458 0.0001523716 -0.0143120539 -0.0074812610 0.0052935429 0.0190897099 0.0106013578 -0.0051272564 -0.0048784919 -0.0011296683 -0.0002303670 -0.0001887098 -0.0000085333 0.0003349842 0.0002909714 -0.0000409529 0.0004179644 -0.0000231494 0.0000143241 0.0003235854 0.0001688201 0.0000333777 0.0003739158 -0.0020553437 -0.0015294007 0.0006285352 0.0000230697 -0.0002266577 -0.0012584374 -0.0013149146 0.0002837513 0.0004774091 -0.0012544658 0.0012770327 0.0002368554 -0.0002918083 -0.0004152681 0.0001713231 -0.0001647824 -0.0005791540 -0.0003585762 0.0019505147 -0.0014681186 -0.0008282746 0.0003447293 0.0002322670 -0.0002724208 -0.0004062575 -0.0000433670 -0.0000890049 0.0007503104 0.0006628961 -0.0004377351 -0.0003840001 -0.0003600023 0.0023093169 0.0022332651 0.0027043198 0.0006004348 -0.0024612019 -0.0013837092 0.0008874749 0.0037794056 -0.0002249983 0.0002201681 0.0140804289 0.0175440780 -0.0127743349 -0.0033341337 -0.0110376229 0.0005386945 0.0109002444 0.0129760188 -0.0107244991 -0.0173217005 -0.0250308603 0.0149722414 0.0069754534 0.0143780132 0.0023107172 -0.0110980237 -0.0114694183 0.0216193316 -0.0076240802 0.0034619754 0.0157871364 -0.0005590441 0.0055546222 -0.0037867749 -0.0082744508 -0.0148305341 -0.0201228674 0.0085658063 0.0026644586 -0.0210679308 0.0088765569 0.0010281024 -0.0596142724 -0.0147824125 0.0493474415 0.0004388228 -0.0250131455 -0.0954312575 -0.0554201090 0.0165770868 0.1468803268 0.0510570141 0.0051055729 -0.0679723209 0.0136392909 0.0300100395 0.0728896742 0.1062399946 0.0456890832 0.0224781371 0.0902447108 0.0416355145 0.0130454799 -0.0316158459 0.0262463711 0.0561440081 -0.0495263270 -0.0387465519 -0.0546233972 -0.0756930808 -0.0593685463 -0.0464098501 -0.0029913589 0.0054320671 0.0076917179 0.0070249181 0.0027300468 0.0068443630 -0.0019018263 -0.0228586827 -0.0376340720 0.0335134448 -0.0019611985 -0.0205201364 0.0132311313 0.0537018130 -0.0232464811 0.0077347611 -0.0514539647 0.0197384050 0.0196903821 -0.0324822716 0.0095323281 -0.0250714440 0.0579483285 -0.0181675820 -0.0249342413 -0.0328977736 0.0176050372 0.0336140177 -0.0539266336 0.0150323566 0.0186159560 0.0263276509 -0.0134918076 -0.0261432218 -0.0513081895 0.0237933596 -0.0104446115 0.0345192180 -0.0092788814 0.0373627438 0.0394378790 -0.0202532589 -0.0564450722 -0.2519525929 0.1292360297 0.0357938754 0.2312334100 -0.1487045684 -0.0276708310 0.0995035986 -0.1240097255 0.0237411173 -0.1916569079 0.1875881606 0.0886368053 0.1694955591 0.0103857158 -0.0713081682 0.1285683781 -0.2025204487 -0.0970656914 -0.1590392261 -0.0175928616 0.1245520731 0.2692739560 -0.0230003927 0.0583393485 -0.1101040079 0.1813004202 -0.1328566277 -0.2593461283 -0.0007446935 -0.0002769124 0.0015307009 -0.0001800725 0.0092944693 0.0049806189 -0.0039167847 -0.0018012447 -0.0025088357 0.0039132043 0.0041508641 0.0048030016 0.0021966120 -0.0002938506 0.0011057107 -0.0006467652 -0.0015740243 0.0046949443 0.0026885265 0.0040606675 0.0040688583 0.0069306122 -0.0133879878 -0.0003262475 0.0048124127 0.0076395742 0.0235157009 -0.0032399734 0.0078955622 -0.0125593658 0.0098889095 -0.0053268429 -0.0123112117 0.0042465288 -0.0150673817 0.0157398605 -0.0079261562 0.0163802298 -0.0218832443 0.0077672067 -0.0123780422 -0.0200078167 0.0014085671 0.0122923754 0.0149304745 0.0027407917 0.0002518748 -0.0075278741 0.0076163937 0.0007126905 0.0123074910 -0.0134988506 -0.0070656995 -0.0121428052 -0.0005217385 0.0001254743 0.0011020000 0.0000094361 -0.0035015936 -0.0007260530 -0.0001866590 0.0012237573 -0.0002157449 0.0018705612 0.0000911519 0.0005487367 -0.0006641710 -0.0022590023 -0.0012897674 -0.0025530448 -0.2312026455 0.2311211593 0.2679393310 0.0855012766 0.1185412263 -0.0089482369 -0.0988993286 -0.0440593805 0.0451800528 0.0314879341 0.0622722621 0.0053698246 0.0559619188 -0.0116477935 -0.0375021694 0.0977146176 -0.0116084590 -0.0650044483 -0.0371622760 -0.0096440573 0.0201874011 -0.1040630453 0.0228721949 0.0672979305 0.0608315245 0.0375253667 -0.0319369371 -0.0759987335 0.0654166924 0.0703070842 -0.0437491733 0.0503361602 0.0465598168 0.1537134237 -0.0683819784 -0.1556683019 -0.1479053838 0.0697138062 0.1482589629 0.0877950449 -0.1088756224 -0.1845983495 -0.0888124661 -0.0970107286 0.0262047011 0.1669193037 0.0758580127 -0.0604407958 0.1122129037 -0.0300864532 -0.0525167894 0.0587503508 0.0724195239 -0.0159342909 -0.1335435271 0.0048956098 0.0590869807 -0.0792115185 -0.0315260387 0.0289547357 -0.0974089061 0.1068428066 0.0564905861 0.0573242036 -0.1974486431 -0.0635605829 0.0713231312 -0.1484156238 -0.0436136929 -0.0911034515 0.0149172714 0.0411772290 -0.1881541618 -0.1464349980 0.0567908824 0.0155530775 -0.0109161516 -0.0054048137 -0.0115819465 0.2299953859 0.0417291195 -0.0061401762 0.0003979072 0.0175500285 0.0004590384 0.1441606190 0.0734701173 -0.0572825625 -0.1914235056 -0.1051484588 0.0537212768 0.0503848250 0.0116701285 0.0015764695 0.0015937877 -0.0002609188 -0.0017363783 -0.0007768473 -0.0001151514 -0.0022821383 -0.0006973994 0.0006679994 -0.0027824640 -0.0015850550 -0.0001794509 -0.0029777827 0.0207497315 0.0151033198 -0.0060977844 -0.0013279101 0.0015084271 -0.0094056869 -0.0050899923 0.0021116509 -0.0100566482 0.0162627602 0.0024804042 0.0052027809 -0.0094480356 -0.0025459961 -0.0049151769 -0.0026576469 -0.0073107754 0.0021203413 -0.0095353196 0.0211538660 -0.0092084424 0.0029367681 -0.0029865137 0.0008825754 0.0025233284 0.0021134598 0.0013758464 -0.0077610021 -0.0078622906 0.0013756013 0.0045489365 0.0033181692 -0.0240556031 -0.0201651195 -0.0231477614 -0.0043718220 0.0282842932 0.0155992943 -0.0113150582 -0.0339775645 0.0033180900 -0.0161889692 -0.0530185750 -0.0641996575 0.0285011100 0.0208508393 0.0387263521 0.0171495032 -0.0490279595 -0.0502820332 0.0242738769 0.0615035895 0.0836361556 -0.0334719334 -0.0257315167 -0.0443751012 -0.0168748199 0.0455311407 0.0407951440 -0.0670105038 0.0321786030 0.0040562449 -0.0703272786 0.0218830472 -0.0007526850 0.0133915822 0.0342592289 0.0603943600 0.0489553986 -0.0306060271 -0.0184755944 0.0689587274 -0.0397924288 -0.0025065981 0.0062201004 0.0009679012 -0.0084429004 0.0014792319 0.0041920133 0.0124112105 0.0063180006 -0.0016272680 -0.0161060412 -0.0078650230 -0.0011989002 0.0080821777 -0.0003738917 -0.0032774654 -0.0115326125 -0.0095081424 -0.0080844992 -0.0053661036 -0.0125917428 -0.0028346746 -0.0047141811 0.0108050801 -0.0087510839 -0.0207829387 0.0101909175 0.0049198713 0.0050827896 0.0123182262 0.0056103251 0.0033808390 0.0118781939 -0.0221883609 -0.0315843438 -0.0255196952 -0.0103432897 -0.0259177709 -0.0001620160 0.0067769742 0.0115120841 -0.0094180997 0.0008700602 0.0066914452 -0.0001747096 0.0295226180 -0.0125291612 0.0005884127 -0.0286448761 0.0120443062 0.0079624474 -0.0137634959 0.0041054651 -0.0086433920 0.0242637278 -0.0078686779 -0.0131526007 -0.0135075086 0.0074712873 0.0140831435 -0.0185978059 0.0047485823 0.0136348073 0.0133273567 -0.0075984546 -0.0155196869 -0.0244545379 0.0119043261 -0.0160380222 0.0189536996 -0.0035717718 0.0171556647 0.0232452557 -0.0112451077 -0.0056834089 -0.0227808097 0.0106217566 0.0056854501 0.0230626711 -0.0115002170 -0.0045534138 0.0086435861 -0.0142392079 0.0039711456 -0.0172712748 0.0198211828 0.0101577056 0.0170777638 0.0027769407 -0.0055258348 0.0162030575 -0.0203715965 -0.0064169066 -0.0120103595 0.0001223888 0.0083412720 0.0207089052 -0.0036881749 0.0041781659 -0.0086785701 0.0136242010 -0.0100964126 -0.0169218236 -0.0024224699 -0.0004265151 -0.0144131688 0.0006510885 -0.0667305200 -0.0692306373 0.0508041822 0.0255103221 0.0407241106 -0.0271568299 -0.0373058610 -0.0613571094 -0.0325662316 0.0017923288 -0.0105727311 0.0008014678 0.0097011648 -0.0728885373 -0.0364895122 -0.0558420215 -0.0053958503 -0.0437677457 0.1488650492 -0.0333519959 -0.0004806309 -0.0112773885 0.0673782033 -0.0026246235 -0.0336689245 -0.0179959179 0.0333680300 0.0263800496 -0.0303798612 0.0052505775 -0.0450362005 0.0613665463 -0.0278522126 0.0483578651 -0.0763611869 0.0261163462 0.0095549184 0.0180006340 0.0000548968 -0.0046875454 -0.0241950062 0.0069528547 0.0125736812 0.0049890366 0.0120372933 -0.0114174805 -0.0077883195 -0.0047890781 -0.0190744092 -0.0056100073 -0.0163347643 -0.0003942724 -0.0016638045 -0.0002077289 -0.0045834383 0.0031487540 -0.0001815806 -0.0004122859 -0.0001016001 0.0008036027 0.0009895485 0.0002355334 -0.0006579142 0.0009858618 0.0011514119 -0.0007350226 0.0932631597 -0.0925140106 -0.1031529304 -0.0380644435 -0.0516088455 0.0044287055 0.0438212490 0.0205051398 -0.0196837055 -0.0158008091 -0.0283180079 -0.0013085030 -0.0244811890 0.0034135982 0.0158197073 -0.0427227489 0.0043769869 0.0281471925 0.0167165340 0.0058399435 -0.0085612752 0.0450298988 -0.0095829972 -0.0289831249 -0.0268012332 -0.0155462091 0.0142141759 0.0322677201 -0.0290407566 -0.0302418316 0.0198716176 -0.0226710774 -0.0206232783 -0.0625257362 0.0278780423 0.0633958746 0.0600291493 -0.0276824517 -0.0612874077 -0.0327163924 0.0423039158 0.0785718696 0.0339872661 0.0414792620 -0.0092787006 -0.0648226387 -0.0342650153 0.0228734166 -0.0394988043 0.0060789712 0.0179449080 -0.0224582025 -0.0337134723 0.0047479618 0.0478202636 0.0043060761 -0.0216596550 0.0299867472 0.0214356763 -0.0094907385 0.0314164657 -0.0411248668 -0.0188942801 -0.0178922691 0.0639799996 0.0307022567 -0.0146175053 0.0532123313 0.0310098442 0.0335645121 -0.0167004442 -0.0166997032 0.0780073041 0.0546769466 -0.0251769036 -0.0067054148 0.0052419178 0.0022481563 0.0062289359 -0.0993054390 -0.0162889472 0.0092116245 0.0003867513 -0.0175199050 -0.0003180364 -0.0684415631 -0.0347128885 0.0284245275 0.0916767211 0.0498686227 -0.0263900024 -0.0246414634 -0.0056531858 -0.0008519047 -0.0004375725 0.0002598662 0.0009388611 0.0003249272 -0.0000469998 -0.0011224536 0.0001407488 -0.0017114014 0.0010440115 0.0003414523 0.0003732593 0.0011476898 -0.0100110081 -0.0071181069 0.0027456049 0.0007712682 -0.0006880573 0.0041766594 0.0007290773 -0.0004710011 0.0045024466 -0.0073272929 -0.0006031486 -0.0023267731 0.0041843989 0.0009703551 0.0191643482 0.0144640812 0.0216915560 -0.0034894126 0.0100354598 -0.0168445926 0.0182488769 -0.0150110305 0.0070271376 0.0036286412 0.0015125984 -0.0055882460 -0.0024059608 0.0067638772 0.0030622958 0.0019731763 -0.0052429303 -0.0021757934 0.0137668747 0.0103416795 0.0123054340 0.0019122750 -0.0149358940 -0.0074928912 0.0063792607 0.0176839797 -0.0023148816 -0.0576487200 -0.1851855681 -0.2265419607 0.1154479387 0.0683460701 0.1388750540 0.0448087575 -0.1648944833 -0.1751736782 0.0950729957 0.2197928855 0.3019181856 -0.1361398535 -0.0894077356 -0.1631338775 -0.0477922837 0.1536639363 0.1422635338 -0.2350340898 0.1118531045 0.0074794961 -0.2386989044 0.0588435011 -0.0159681585 0.0534086446 0.1013508243 0.1835860272 0.1948129069 -0.1102797690 -0.0542581468 0.2414769743 -0.1321477387 -0.0015497096 -0.0071764138 -0.0008512078 0.0098431920 -0.0026329574 -0.0059815919 -0.0172808048 -0.0074976018 0.0030978306 0.0230649949 0.0069552331 0.0000994412 -0.0107858267 0.0025847545 0.0052010191 0.0138909293 0.0137151653 0.0086510557 0.0065657571 0.0164057318 0.0071425691 0.0066896968 -0.0077321540 0.0069342147 0.0155305838 -0.0076013851 -0.0057138099 -0.0089441635 -0.0138282456 -0.0086566875 -0.0069638021 0.0351140222 -0.0666190145 -0.0943624596 -0.0876598774 -0.0339395085 -0.0842329290 -0.0001975367 -0.0056302155 -0.0095059192 0.0074196227 -0.0005978031 -0.0050304589 -0.0148571596 0.0738563691 -0.0300500934 0.0018607505 -0.0689915152 0.0294386019 0.0078872933 -0.0253623574 0.0086491380 -0.0071617456 0.0455073917 -0.0162127175 -0.0232998877 -0.0247440144 0.0134228881 0.0296403586 -0.0211672085 0.0030935193 0.0435401037 0.0328282865 -0.0205014390 -0.0462180698 -0.0582506447 0.0299882012 -0.0535023456 0.0496187726 -0.0077659645 0.0401400228 0.0706640592 -0.0322657899 0.0005845709 0.0041334842 -0.0034216511 -0.0061234843 -0.0064573810 -0.0031142355 0.0037465608 -0.0008372687 0.0066088916 -0.0030729080 0.0015353456 -0.0061594183 -0.0071501384 -0.0058453447 -0.0060154905 -0.0008095417 -0.0089044086 0.0057275073 -0.0024700507 -0.0023613354 -0.0018530188 0.0035040359 0.0034876297 0.0025656159 0.0000949285 -0.0016254059 0.0020313343 -0.0020610130 -0.0081723411 0.0035898138 0.0003473509 0.0069566129 -0.0005167790 0.0314136411 0.0318132558 -0.0232322891 -0.0119477436 -0.0199342336 0.0140751906 0.0160723468 0.0285514032 0.0151629282 -0.0010125357 0.0049808617 -0.0006239760 -0.0024353593 0.0346327662 0.0157759814 0.0277016483 0.0039236203 0.0241366469 -0.0710361679 0.0142158214 0.0025075340 -0.0279668325 -0.0083557297 0.0042433959 -0.0437738714 0.0166953922 -0.0009103351 0.0320165127 0.0075009918 -0.0060456365 0.0069279303 0.0222992625 -0.0056189355 0.0037961853 -0.0062765090 0.0002849864 0.0950223392 0.1352861386 0.0113423693 -0.0827517660 -0.1172981121 -0.0199226598 0.0682252147 0.0530711162 0.0382573494 -0.0660416068 -0.0773500263 0.0229243489 -0.0848450391 0.0167438565 -0.0821288091 -0.0073010313 -0.0060547613 -0.0050616297 0.0006525559 0.0018799911 -0.0003206134 -0.0013811013 0.0000308421 0.0000396136 0.0012764337 0.0003265422 -0.0006599731 0.0008542936 -0.0004258495 0.0006874782 -0.0335824458 0.0292832514 0.0384167184 0.0085927453 0.0147985746 -0.0032459814 -0.0066484882 -0.0021185955 0.0034184556 -0.0044654881 0.0022324822 0.0041440312 0.0031356624 -0.0021010863 -0.0025188073 0.0074417781 -0.0012801861 -0.0049550644 -0.0013128344 0.0007532594 0.0008207539 -0.0022233885 0.0026062991 0.0020743710 0.0031892221 0.0075067644 0.0001393075 -0.0181530182 0.0101998628 0.0124099413 -0.0003218211 0.0024639966 0.0051830550 0.0146197570 -0.0074263528 -0.0149418160 -0.0068170227 0.0077188698 0.0103873672 -0.0073664383 0.0087575549 -0.0048780034 -0.0430324838 -0.0297984401 0.0143938200 0.0548123890 0.0313531340 -0.0189346380 0.0367099236 -0.0015532191 -0.0158055226 0.0205548542 0.0313343035 -0.0045932823 -0.0388567334 -0.0052259901 0.0163527132 -0.0255375505 -0.0248617404 0.0070263946 -0.0246941815 0.0402515806 0.0167123144 0.0208726831 -0.0558065106 -0.0194811479 0.0143314707 -0.0466816007 -0.0127853660 -0.0278917114 0.0241097949 0.0156971471 -0.0648594597 -0.0424537422 0.0214775593 0.0001300471 -0.0007549802 -0.0002593895 0.0013491310 0.0106057247 0.0025136646 0.1296330093 -0.0016994498 -0.2764263523 0.0004218147 0.0117804909 0.0055244584 -0.0052412838 -0.0150301640 -0.0080922699 0.0044916411 0.0042200778 0.0009658549 0.0000989713 -0.0001066428 -0.0000017351 -0.0002243584 0.0005265640 -0.0000143130 0.0001752089 -0.0000444404 -0.0000052622 -0.0002102204 0.0000301058 -0.0000465250 -0.0001110643 0.0016873393 0.0011839852 -0.0004796359 -0.0003574992 -0.0000749283 -0.0011093527 -0.0032218649 0.0015670951 -0.0005166254 0.0007393474 0.0004915493 0.0009636855 -0.0027977128 -0.0015576784 -0.0014637249 -0.0012897303 -0.0032261587 0.0003510765 0.0007545493 0.0043286125 -0.0052596973 0.0010622031 0.0001972171 -0.0003767807 0.0000003315 0.0006717475 0.0003351154 -0.0009866912 -0.0005145772 -0.0001194321 0.0003267096 0.0001465514 -0.0016956710 -0.0010334537 -0.0006758504 0.0000187926 0.0028180581 0.0015763461 -0.0012517098 -0.0015789983 0.0002911739 0.0032434394 0.0077034140 0.0086317344 0.0049839923 -0.0057058186 -0.0037036517 -0.0105455704 0.0116515158 0.0089378189 0.0019755122 -0.0098340649 -0.0110884443 -0.0049228987 0.0051935208 0.0037982562 0.0089971801 -0.0104367518 -0.0065122940 0.0002730801 -0.0055555714 -0.0082530606 0.0142655031 -0.0099123041 -0.0065984046 -0.0009615784 -0.0036329578 -0.0061109064 0.0021996160 0.0055738252 0.0077068123 -0.0109517719 0.0114979697 0.0041624493 -0.1461043577 -0.0347629828 0.1440551882 -0.0018510340 -0.0662790442 -0.2371575664 -0.1455387908 0.0361600617 0.3597925840 0.1591916618 0.0261902698 -0.1693202366 0.0055834055 0.0574054464 0.1946044195 0.2226721894 0.1353534481 0.0771450901 0.2210176906 0.1084349928 0.0384113752 -0.0924797772 0.0748280638 0.1653751295 -0.1698021510 -0.1088502387 -0.1171101786 -0.2112014656 -0.1228387126 -0.0699677846 -0.0014303021 0.0026939455 0.0037078594 0.0024091003 0.0009667371 0.0022803233 -0.0038287905 -0.0629180494 -0.1050088803 0.0940143972 -0.0061890706 -0.0594039375 -0.0101359124 -0.0162030948 0.0077719354 -0.0020024601 0.0166101525 -0.0065015282 -0.0117954081 0.0133632917 -0.0033314593 0.0137244397 -0.0226495274 0.0064496996 0.0134361139 0.0132267939 -0.0076768171 -0.0109415003 0.0258077704 -0.0080404765 -0.0013642964 -0.0070790124 0.0030771604 0.0037754694 0.0148778997 -0.0062395550 0.0005605858 -0.0089742891 0.0016004718 -0.0101744788 -0.0038406009 0.0030412522 0.0224784393 0.0887637337 -0.0424983138 -0.0455334876 -0.1090025102 0.0264558785 0.0430763238 -0.0296525387 0.0933796900 -0.0363555763 0.0672470828 -0.1103300745 -0.0704069683 -0.0910263122 -0.0419144898 0.0120661807 -0.1167748775 0.1044097576 -0.0049526805 0.0185308985 -0.0229908194 0.0012350706 -0.0391217233 0.0333238011 0.0017134972 0.0204735646 -0.0158939030 0.0206571505 -0.0056287811 0.0368417705 -0.0009195889 -0.0008189665 -0.0003522442 0.0025077567 -0.0119436143 0.0080632410 0.0042935259 0.0076474927 0.0019709765 -0.0022159291 -0.0092472227 -0.0059644212 -0.0001236561 -0.0008351229 -0.0016232347 -0.0008292992 -0.0117156484 -0.0052201948 -0.0079988174 0.0090233134 0.0040231056 0.0154542528 -0.0124856129 0.0128318695 -0.0053637140 -0.0004847955 0.0005388233 -0.0071122625 0.0019952147 -0.0001486918 0.0064497057 0.0004861708 -0.0008457413 -0.0039691905 0.0002402990 -0.0001862251 0.0020759684 -0.0026022502 0.0010841458 -0.0066550080 -0.0079747675 -0.0020458183 0.0056404576 0.0069964544 0.0018730061 -0.0046132420 -0.0035097615 -0.0025050489 0.0047848004 0.0049996845 -0.0016629111 0.0063700188 -0.0012591258 0.0055122096 0.0014040094 -0.0002346509 0.0011669735 0.0009501183 0.0009948357 0.0003115110 -0.0008783995 0.0003694490 -0.0020010137 -0.0001968727 -0.0005041864 0.0009195493 0.0022288989 0.0006620506 0.0024955730 0.0610787419 -0.1002749043 -0.0832721438 -0.0795426256 -0.0874894388 0.0163688830 0.0793226263 0.0500970040 -0.0311364788 -0.0446303195 -0.0610360003 0.0056143661 -0.0417829987 -0.0207227406 0.0180012617 -0.0674053534 -0.0051976406 0.0400975464 0.0304795279 0.0329336360 -0.0072853899 0.0791436667 0.0026055518 -0.0452648661 -0.0485901898 0.0076298091 0.0362797543 0.0433312629 -0.0567337187 -0.0468083332 0.0369693869 -0.0620116031 -0.0484092232 -0.0984244493 0.0336755113 0.0974574170 0.1491851653 -0.0277549999 -0.1194564606 -0.1835845200 0.2320681092 0.1981703652 -0.2398048229 -0.1333244347 0.0829910930 0.2373244297 0.1690766143 -0.0773081291 0.1490299695 0.0387919178 -0.0569398521 0.0921229930 0.1860631200 -0.0137327503 -0.1410514413 -0.0607667847 0.0532097095 -0.1068293044 -0.1816695380 0.0175665858 -0.0616036705 0.1917142442 0.0553454562 0.0964676914 -0.2396777365 -0.0794887290 0.0160488285 -0.1954663457 -0.0331439424 -0.1093226055 0.1969664600 0.0770048617 -0.2998625277 -0.1559566328 0.1072631878 -0.0127830978 0.0051910040 0.0033611268 0.0136400436 -0.1558093012 -0.0237767305 -0.0130720539 -0.0003073950 0.0254241098 -0.0011651852 -0.0769489107 -0.0401422477 0.0290038259 0.1049938983 0.0591636313 -0.0298453112 -0.0279109409 -0.0064418990 -0.0002861999 -0.0005217230 -0.0001711864 0.0006940693 0.0001434157 0.0001650971 0.0014763370 -0.0000848570 -0.0002789720 0.0013035373 0.0006933425 0.0003001549 0.0030661529 -0.0123812620 -0.0095137493 0.0028828090 0.0013466186 -0.0008029999 0.0058089967 0.0041472169 -0.0017708322 0.0050977506 -0.0084951669 -0.0013986162 -0.0017567696 0.0052454064 0.0021661996 0.0023985175 -0.0001722516 0.0001787726 -0.0011836722 0.0083195856 -0.0054333758 -0.0040230432 0.0008901535 0.0013683578 -0.0003062412 -0.0013240396 -0.0013633560 -0.0006086281 0.0036810839 0.0033433041 -0.0007351800 -0.0016677533 -0.0012300295 0.0150944413 0.0112235932 0.0138118278 0.0029853515 -0.0145101362 -0.0064606102 0.0058405174 0.0189865437 -0.0018120007 -0.0005842034 0.0020722868 0.0017376156 0.0028465128 -0.0017666516 -0.0005674783 -0.0040138632 0.0036430161 0.0023182608 0.0004226182 -0.0021809525 -0.0024421597 -0.0030498838 0.0016033224 0.0004900172 0.0036236636 -0.0032446813 -0.0017547882 0.0001451523 -0.0018963336 -0.0016947937 0.0048878715 -0.0058017665 -0.0023534658 0.0052920762 -0.0016062159 -0.0009186315 0.0034355979 0.0013754757 0.0036553919 -0.0033151825 0.0039286951 0.0023680874 0.0163897921 0.0046842633 -0.0133307100 -0.0020699720 0.0049915742 0.0216353330 0.0158656961 -0.0031319240 -0.0360298356 -0.0176470496 -0.0036113890 0.0167632833 0.0011263184 -0.0042446139 -0.0171030364 -0.0232477582 -0.0132113354 -0.0058707273 -0.0200864841 -0.0113688270 -0.0002230523 0.0040959236 -0.0031444058 -0.0059805093 0.0177011594 0.0117204129 0.0108484890 0.0193729241 0.0114134030 0.0047905499 -0.0016902420 0.0017649252 0.0022425819 -0.0022217380 -0.0004753006 -0.0012009683 0.0006460172 0.0031114657 0.0050224126 -0.0054333971 0.0001468438 0.0028374901 -0.0015900241 0.0008169817 -0.0000741301 0.0008238020 -0.0000446280 -0.0000648511 -0.0029268090 0.0012080285 -0.0000043333 0.0028020269 -0.0018179280 0.0002297297 0.0026922772 0.0010227762 -0.0008158552 -0.0000497316 0.0042689405 -0.0016373693 0.0027986921 0.0005409762 -0.0007251005 -0.0026283181 -0.0009423653 0.0008191943 -0.0029371483 0.0014790798 0.0001418657 0.0004426369 0.0041191638 -0.0016046156 -0.0010785579 -0.0049990724 0.0027068799 0.0025035900 0.0065786827 -0.0018563972 -0.0033172211 0.0015537494 -0.0066432794 0.0027072975 -0.0041047609 0.0074975489 0.0048526418 0.0060181031 0.0033454308 -0.0004956339 0.0081962647 -0.0067542724 0.0012003214 -0.0004572899 0.0022072898 -0.0008425523 0.0014666016 -0.0024969737 -0.0009754467 -0.0011523621 -0.0002835131 -0.0009752749 0.0018106195 -0.0029042094 0.0003879636 0.0083025782 -0.0007668833 0.0398690857 0.0304954253 -0.0213534743 -0.0123203659 -0.0209570265 0.0216690916 0.0151415376 0.0267905048 0.0146215561 -0.0002365153 0.0055074422 -0.0004768607 -0.0120490591 0.0368587894 0.0236660095 0.0229407774 0.0040690081 0.0163272220 -0.0772481267 0.0190460072 -0.0026555944 -0.2301302166 -0.0484458058 0.0367031368 -0.3051559737 0.1021058304 -0.0013292714 0.2709320259 0.0312194047 -0.0400707970 -0.1441223943 0.0648091290 -0.0185406798 0.1552384913 -0.0749966913 0.0220931868 0.0334760957 0.0308094036 0.0242118205 -0.0173757967 -0.0331731815 -0.0123369302 0.0550775649 0.0045303876 0.0715849916 -0.0489858259 -0.0010515993 -0.0677135187 -0.0814859728 -0.0517927502 -0.0601227829 -0.0042379419 -0.0015257863 -0.0034530985 -0.0139014176 0.0077440753 0.0013962966 -0.0036368964 -0.0032521138 -0.0036423116 0.0035768941 0.0022674996 -0.0009461268 0.0022175514 -0.0006990302 0.0050963068 -0.0138916442 0.0144885439 0.0145870164 0.0016822683 -0.0016171149 -0.0011210159 0.0006604317 -0.0016376718 -0.0009174639 -0.0032210381 0.0022671167 0.0031161594 -0.0001022817 0.0032551605 0.0013097045 -0.0028302635 0.0022232167 0.0025036518 0.0015384939 -0.0034227845 -0.0022016689 -0.0002519418 -0.0020231345 -0.0012124043 -0.0006921948 -0.0064162346 -0.0035810739 0.0063446074 -0.0013380750 -0.0041414775 0.0013264774 0.0069300243 0.0011587658 0.0084199820 -0.0029208747 -0.0081031665 -0.0087656625 0.0025600180 0.0076968293 0.0078530934 -0.0103185085 -0.0111468954 0.0057134972 0.0025674465 -0.0019485283 -0.0040396344 -0.0039250865 0.0011613008 -0.0020743468 -0.0022139293 0.0005159264 -0.0016383571 -0.0049631299 0.0000500077 0.0015286579 0.0022497764 -0.0002785098 0.0016642720 0.0054628272 0.0001282044 -0.0007802754 -0.0035611423 -0.0003151674 -0.0021759584 0.0046516713 0.0003934999 0.0007148724 0.0034726172 -0.0007286423 0.0014394904 -0.0061600081 -0.0015806538 0.0057300258 0.0018033438 -0.0022664938 0.0002638772 -0.0009746197 0.0003622270 0.0035598044 0.0315670266 -0.0087548153 -0.0166082582 -0.0027732567 0.0357743448 0.0001646065 0.0076705307 0.0038938959 -0.0040297780 -0.0105605212 -0.0054053462 0.0035226528 0.0030428882 0.0006056163 -0.0001594040 0.0001526882 0.0001817625 0.0003129589 0.0005601886 -0.0003708197 0.0001268657 -0.0014116664 0.0003595939 -0.0000893696 -0.0002905675 -0.0001664674 0.0001243523 0.0009758295 0.0005946113 -0.0002936465 -0.0000491197 0.0000969419 -0.0050522081 -0.0070550492 0.0032049089 -0.0020276384 0.0016998746 0.0043020889 0.0021160961 -0.0037346409 -0.0021197153 0.0059603655 0.0033205066 -0.0056956168 -0.0030583916 0.0119792566 0.0029893644 -0.0068246624 0.0024654319 -0.0006651624 0.0006165332 0.0005686102 0.0001788031 -0.0004732292 0.0005324221 -0.0002259989 -0.0000471178 0.0000635141 0.0000147153 -0.0017886326 -0.0009537579 -0.0012234123 -0.0001166380 0.0021081760 0.0011515186 -0.0009950709 -0.0018193230 0.0005223894 -0.0720183063 0.0593449435 0.0039720305 0.1992990647 -0.0612827357 0.0385689113 -0.1737357353 0.1117997191 0.0507667958 0.0940007455 -0.0392700946 -0.0106512890 -0.1878857460 0.0442913376 -0.0337051652 0.1640736743 -0.1169051371 -0.0428935205 -0.2049604359 -0.0226930250 -0.1640060278 0.1015575818 -0.1423922791 -0.1353731167 0.0218557019 -0.0120244406 -0.0103816516 0.1610257925 0.0387530412 0.1115517898 -0.0931852866 0.1653135451 0.1075287762 0.0431263186 0.0189639234 -0.0137929735 -0.0240807167 -0.0099950185 0.0038440200 0.0312504316 0.0057793532 -0.0291251707 -0.0514324418 -0.0201059559 0.0156298166 0.0258485598 0.0122432175 -0.0049835646 -0.0412944100 -0.0254846933 0.0073199553 -0.0101922063 0.0032571591 0.0290779768 0.0145432911 -0.0080154522 -0.0206296332 0.0538909368 0.0225461939 -0.0079416548 0.0153941028 -0.0043361955 -0.0286600001 -0.0075756047 0.0127792636 0.0173275783 -0.0104428036 -0.0030239785 -0.0081847192 -0.0000243129 0.0062277754 0.0105393486 -0.0137950502 0.0008668495 0.0089301026 -0.0485817254 -0.0042200904 0.0081883964 0.0091073441 0.0374263510 -0.0153207479 -0.1559699210 0.0724918495 -0.0033028378 0.1418761326 -0.1118569477 0.0194115310 0.1597504454 0.0619605846 -0.0491318697 -0.0144375820 0.2204008001 -0.0810953313 0.1293297860 0.0090346987 -0.0268908941 -0.1105721017 -0.0192138503 0.0268237206 -0.1288224687 0.0461207079 0.0101252873 0.0005401492 0.1687173600 -0.0620093691 -0.0044338387 -0.0215259268 0.0110002277 -0.0097602837 0.0088874134 -0.0198540407 0.0170817101 0.0080894717 0.0205176122 -0.0142441967 -0.0094911499 -0.0151325220 -0.0129891722 -0.0049023993 -0.0131612211 -0.0099158376 -0.0353862569 0.0113297123 -0.0327600183 -0.0329388379 -0.0231057128 0.0337454915 0.0468359018 0.0144775949 0.0243153574 -0.0131097232 0.0484398399 -0.0188901225 -0.0652030182 0.0227635038 0.0000615798 -0.0008581273 0.0001163640 -0.0042758562 -0.0026343518 0.0019337411 0.0011416439 0.0019362795 -0.0020609957 -0.0018120989 -0.0025544264 -0.0011521051 0.0003504182 -0.0007078697 0.0003354730 -0.0007582403 -0.0049506550 -0.0011633965 -0.0062049621 0.0013135181 -0.0044634212 0.0075831651 -0.0010902529 -0.0010043038 0.0353589684 0.0074144643 -0.0065511964 0.0417254337 -0.0120724821 0.0006495082 -0.0460743148 -0.0013991710 0.0053544313 0.0551783841 -0.0026568159 0.0062445092 -0.0410203881 0.0187424428 -0.0080009707 0.1411552033 0.1258092768 0.0853849354 -0.1281964619 -0.1126105783 -0.0798377767 0.1682604591 0.0262066005 0.2084371117 -0.1478401491 -0.0141964134 -0.1946951841 -0.2217761928 -0.1340879362 -0.1648703327 -0.0100013176 -0.0107121485 -0.0110645801 0.0025894215 -0.0031288474 -0.0009605541 -0.0042174555 0.0046548621 0.0002001042 0.0024085266 -0.0006703610 -0.0013375807 0.0021945850 -0.0021693727 0.0023196697 0.0086083468 -0.0065465649 -0.0087925960 -0.0071814721 0.0038599994 0.0065288216 -0.0021752494 0.0074597181 0.0040070561 0.0067556651 -0.0132099045 -0.0097329744 0.0038258159 -0.0169974728 -0.0080121988 0.0107957773 -0.0109487267 -0.0106703331 -0.0039484926 0.0209720705 0.0104268081 -0.0137873885 0.0115448094 0.0119926085 0.0024750299 0.0162295852 0.0021631922 -0.0121129965 -0.0030945779 0.0073270325 -0.0036155668 -0.0270581958 -0.0092085193 -0.0036907506 0.0034804463 0.0044362340 0.0019889014 -0.0011167465 -0.0021519310 -0.0025259783 0.0020290330 0.0035301704 0.0002000489 0.0018220794 -0.0000300777 -0.0007891206 -0.0014112605 0.0001419811 0.0003364779 -0.0012114524 -0.0002814015 0.0000096366 -0.0025015735 -0.0003483924 -0.0002303883 0.0013673017 0.0002766541 0.0001991019 0.0021375307 0.0002231505 -0.0015578236 -0.0002079393 0.0005114403 0.0001361285 0.0047963256 0.0008468713 0.0017192390 0.0003532022 -0.0008340622 -0.0000230007 -0.0023970525 -0.0003989198 0.0018135656 0.0000562711 -0.0007756722 0.0004513157 -0.0017770116 -0.0008428537 0.0087590178 0.0198909095 0.0002978744 -0.0705618408 -0.0311651382 0.0665758804 0.0000861237 -0.0038621243 -0.0020943440 0.0012025815 0.0051622477 0.0030681566 -0.0013788687 -0.0013337778 -0.0003533070 0.0000341649 0.0000215230 0.0000837245 0.0002017962 0.0003436948 0.0000998909 0.0001995124 0.0001311223 -0.0000685247 0.0000554394 0.0000602166 -0.0000459351 0.0002651176 -0.0006519735 -0.0005754072 0.0001562446 0.0001104834 0.0000098101 -0.0013730826 -0.0033180817 0.0016784708 -0.0001221029 0.0014361232 -0.0005910072 -0.0007841692 -0.0024381912 -0.0021859589 -0.0017986167 -0.0013853810 -0.0002162450 0.0006270620 -0.0015757555 0.0000678008 -0.0006825635 0.0010929808 -0.0005607145 -0.0002934317 -0.0002668150 0.0001322449 0.0001541261 -0.0001928297 0.0002231227 -0.0000486388 0.0000533109 -0.0000373081 0.0004312935 0.0003672877 0.0003563753 0.0001382019 -0.0005434399 -0.0002480419 0.0002031231 0.0006395739 0.0000795448 0.0366330919 -0.0207134163 0.0030377315 -0.0699262200 0.0186867561 -0.0164742085 0.0561009135 -0.0341924518 -0.0139017278 -0.0313606720 0.0098724082 -0.0004238295 0.0638781218 -0.0138481497 0.0130929556 -0.0560972588 0.0384271332 0.0136148133 0.0758590418 0.0056835607 0.0534272214 -0.0281502494 0.0444310348 0.0435233349 -0.0084473171 0.0020449508 -0.0001534051 -0.0542486964 -0.0116954324 -0.0361739549 0.0328467279 -0.0562363359 -0.0393541493 0.1667255694 0.0799320009 -0.0245642423 -0.1093636286 -0.0621141388 -0.0409643543 0.0997603036 0.0328528030 -0.0422268969 -0.1843862581 -0.0812470735 0.0267405437 0.1171122039 0.0720293083 0.0364440540 -0.1576814929 -0.0818042565 0.0574568300 0.0059172581 0.0394289773 0.1388188966 0.0414877298 -0.0136153650 -0.0444317302 0.1873700934 0.0693341410 -0.0619734049 0.0028576737 -0.0525646411 -0.1492298992 0.0019236431 -0.0030184214 -0.0039818677 0.0049775626 0.0016294786 0.0042520061 -0.0011831896 0.0100631857 0.0173111969 -0.0370926611 0.0019470579 0.0238292673 0.0003752354 -0.0179962346 0.0068531138 -0.0008003745 0.0102056400 -0.0052413421 0.0429681390 -0.0101589664 -0.0028959974 -0.0351228923 0.0141661434 0.0004305752 -0.0413039526 -0.0066487036 0.0083260813 -0.0067163370 -0.0506804704 0.0200274992 -0.0514644974 -0.0115287880 0.0142005714 0.0452407656 0.0240228068 -0.0170481893 0.0610030484 -0.0302880354 -0.0067532165 -0.0101662027 -0.0646639772 0.0253412451 -0.0067929875 -0.0148418572 -0.0020821506 -0.0234452098 -0.0246021459 -0.0088297888 0.0994814527 0.0101086862 0.1529698455 -0.0802296645 0.0208713462 -0.1433994450 -0.1125737958 -0.0988161824 -0.1068927174 -0.0276087047 -0.2114233866 0.1137318441 -0.1302925574 -0.1020425804 -0.1158060871 0.1191299319 0.1306116669 0.0792045011 0.1086540595 -0.0176062186 0.1760970324 -0.0441119677 -0.2261020220 0.1108348564 0.0001211693 0.0003149176 0.0000457828 0.0002212579 0.0028618643 -0.0019328317 -0.0010547251 -0.0016823866 -0.0001699998 0.0012733983 0.0023503982 0.0014726026 0.0001607612 0.0002866771 0.0005735756 -0.0013379930 0.0000508462 0.0016098164 -0.0007430691 -0.0008953734 -0.0030008356 -0.0025678517 0.0027195139 -0.0028336787 0.0458060007 -0.0002865581 -0.0037517430 0.0422335681 -0.0155269577 0.0006233217 -0.0383942282 -0.0048571282 0.0060643694 0.0194687152 -0.0077294897 0.0029019943 -0.0222072563 0.0122183803 -0.0041513444 0.0097587583 0.0072715411 0.0070795471 -0.0090481276 -0.0063278980 -0.0053960297 0.0086444268 0.0010445489 0.0108820388 -0.0095159184 -0.0014317662 -0.0122813635 -0.0108200811 -0.0072320488 -0.0073866025 -0.0017581628 0.0001581759 -0.0021563832 0.0015439972 -0.0015001949 -0.0003537872 -0.0001396702 -0.0011509349 0.0034940903 0.0012715875 0.0012175470 -0.0015323131 -0.0022797203 0.0045081777 -0.0046002868 -0.2110907501 0.1876918317 0.2324128861 0.0140915242 -0.1350352924 -0.0496988019 0.1005141684 -0.0374051936 -0.0747918519 -0.1500392887 0.1056609756 0.1432347757 -0.0801526354 0.1727067934 0.1057873805 -0.1926112413 0.1226769672 0.1631377333 0.0818438550 -0.2113120965 -0.1312294015 0.2156681281 -0.1431268430 -0.1737888607 -0.0736801728 -0.1990889344 -0.0046678165 0.2311897878 -0.0403433924 -0.1553516069 0.0801401519 0.3030438159 0.0653303536 0.0839284204 -0.0460565595 -0.0871549796 -0.0575605342 0.0268560676 0.0543663387 0.0602751337 -0.0608154465 -0.0761389614 0.0209674443 -0.0289665289 -0.0104080612 -0.0034434328 0.0145578728 0.0033553330 -0.0219207030 0.0212438811 0.0117319017 -0.0078500760 0.0384462379 0.0087964117 0.0168405758 -0.0240423445 -0.0104459420 0.0051104454 -0.0280109214 -0.0060938288 0.0351552686 -0.0134773421 -0.0152330987 -0.0118810067 -0.0868172200 -0.0122964840 -0.0361728332 0.0072628546 0.0177776678 0.0090346125 0.0293974573 0.0008949632 -0.0141243784 0.0105630486 0.0072481178 -0.0194634183 0.0374393368 0.0139662730 -0.0323589529 -0.3756874331 -0.0145194229 -0.0008168114 0.0012819201 0.0088189332 -0.0003318499 0.0567872347 0.0303364138 -0.0212222290 -0.0772577134 -0.0441271302 0.0224863357 0.0207388214 0.0048811041 -0.0002392130 0.0000790170 0.0000600766 -0.0002447147 -0.0000294228 -0.0000351580 0.0004974610 0.0002231813 -0.0003081655 -0.0007430971 -0.0003086272 -0.0002454062 -0.0027569080 0.0089107454 0.0074394650 -0.0021967651 -0.0012544379 0.0000022584 -0.0046837424 -0.0030086783 0.0011540010 -0.0033829154 0.0058865936 0.0010814808 0.0005022853 -0.0036158096 -0.0017945746 -0.0049677792 -0.0031845032 -0.0056089450 0.0021237184 -0.0011121362 0.0147439397 -0.0154405743 -0.0004803590 0.0020247085 -0.0006280353 0.0002440674 0.0012805484 0.0007005900 -0.0028539079 -0.0020567746 -0.0000977341 0.0011026995 0.0006309393 -0.0083689814 -0.0062884434 -0.0068201840 -0.0014147734 0.0100718354 0.0056494312 -0.0049623309 -0.0106821737 0.0010742466 -0.0351070943 0.0128642585 -0.0053868866 0.0355685171 -0.0065899430 0.0121242681 -0.0234467718 0.0125422650 0.0035843168 0.0146190986 -0.0018811904 0.0035506902 -0.0314850307 0.0058787252 -0.0079760743 0.0290266144 -0.0188169440 -0.0068796438 -0.0327610300 0.0048352584 -0.0254371976 0.0035595192 -0.0106173622 -0.0159952539 0.0025846702 0.0025566913 0.0052277817 0.0247282841 0.0045984241 0.0157421418 -0.0188649680 0.0283037093 0.0230321765 0.0043438577 0.0013949025 -0.0035436240 -0.0013989024 0.0006911856 0.0046784303 0.0051812193 -0.0001469002 -0.0085369600 -0.0056940374 -0.0015197952 0.0040320946 0.0010498408 -0.0006958676 -0.0045209502 -0.0055720363 -0.0042127106 -0.0012781492 -0.0057728981 -0.0005453204 0.0006006754 -0.0020835224 -0.0000755861 0.0018380929 0.0055050817 0.0039958138 0.0022450286 0.0051572052 0.0015702318 -0.0002708382 0.0007259195 -0.0009621081 -0.0014522325 -0.0027587533 -0.0013516877 -0.0033027873 0.0004710164 0.0000720051 -0.0000107541 0.0007218701 -0.0001666972 -0.0007853172 -0.0027667112 -0.0013888601 0.0009444645 0.0062105057 -0.0044274726 0.0004113630 0.0345816778 -0.0118225294 -0.0009379334 -0.0275202961 0.0185165176 -0.0025237446 -0.0358679289 -0.0083934397 0.0087608372 -0.0010501845 -0.0389325440 0.0148831815 -0.0309263250 -0.0028294402 0.0067614795 0.0246176754 0.0075313072 -0.0072085861 0.0329800382 -0.0120044058 -0.0032258058 -0.0012998465 -0.0356480241 0.0132596882 -0.0024726410 -0.0008670952 -0.0034914001 0.0018014473 -0.0014271102 0.0041667963 0.0102371536 0.0008808641 0.0159018748 -0.0077059425 0.0032580143 -0.0147574990 -0.0116444370 -0.0105341567 -0.0113791841 -0.0023158741 -0.0200108605 0.0112529253 -0.0125531896 -0.0085274174 -0.0122252392 0.0102829041 0.0102647260 0.0076542504 0.0115542903 0.0002273046 0.0168095937 -0.0026786384 -0.0185436642 0.0104647625 0.0003417894 -0.0054731184 0.0007211565 -0.0270013278 -0.0247803472 0.0187453653 0.0093306080 0.0139199293 -0.0121418480 -0.0164408380 -0.0242362311 -0.0125819425 0.0008299368 -0.0041761367 0.0002138118 0.0044881835 -0.0275606041 -0.0144116608 -0.0266531734 0.0015322866 -0.0166642356 0.0534547763 -0.0116777834 0.0008421035 -0.0087104069 0.0005677900 0.0011386896 -0.0078933533 0.0031431879 0.0006035592 0.0073187881 0.0008391889 -0.0012149211 -0.0035101138 0.0019219443 -0.0006150774 0.0049777069 -0.0021754791 0.0005907074 0.0019510194 0.0015306951 0.0015893310 -0.0010557710 -0.0015257118 -0.0005892110 0.0021972668 0.0003279570 0.0025117087 -0.0031649845 -0.0011462605 -0.0027248171 -0.0034099892 -0.0015990932 -0.0022357332 -0.0006237459 0.0002225168 -0.0005511716 -0.0009466790 -0.0000211637 -0.0001237995 0.0002598280 -0.0004245490 0.0009297851 0.0003455242 0.0004118353 -0.0006064601 -0.0010557062 -0.0003930144 -0.0010489698 -0.0115178221 -0.0034350938 0.0093061635 0.0351043617 0.0452614781 -0.0053637685 -0.0455930580 -0.0255164593 0.0191108160 0.0545482872 0.0176808312 -0.0304813794 0.0255799255 0.0099596697 -0.0118642231 0.0456419355 -0.0065881488 -0.0306853761 -0.0232121817 0.0015739237 0.0155773456 -0.0621304956 -0.0065107547 0.0342566555 0.0292764777 -0.0113918357 -0.0243674707 -0.0346021543 0.0280180806 0.0310542955 -0.0259635934 -0.0160227650 0.0109646170 -0.0053906781 -0.0030345178 -0.0001376228 -0.0212247263 0.0365623335 0.0281658917 0.0408413963 -0.0042975908 -0.0559363828 0.1043490290 -0.1806037186 -0.0728145893 -0.0669386233 0.1124469717 0.0435452343 -0.2051292581 0.2104133841 0.1163715697 -0.0609955636 0.2935299255 0.0693737681 0.1840428783 -0.2032435730 -0.1078737998 0.0628632066 -0.2686161993 -0.0652355625 0.3236475516 -0.1140978281 -0.1498634412 -0.0878771980 -0.3759694806 -0.0272045924 -0.2940084011 0.0909384182 0.1390706735 0.1002064156 0.2843501454 0.0010858987 -0.0603928700 0.1430911945 0.0490355961 0.0100030064 -0.0017015135 -0.0025945327 -0.0030324417 0.1044357792 0.0084348908 0.0054307720 0.0028823930 -0.0000567086 -0.0010888081 0.0113950409 -0.0002164985 -0.0048736816 -0.0120842647 -0.0086969924 0.0052234345 0.0038914916 0.0013920865 -0.0004587056 -0.0002166432 0.0002380633 0.0001584321 0.0002258428 -0.0001638963 0.0000257111 -0.0001426653 -0.0006261714 0.0000270620 0.0000846272 -0.0002522236 -0.0004540649 0.0015060170 0.0020550209 -0.0006657430 0.0000123804 -0.0000230454 -0.0014276836 -0.0017699307 0.0007912578 -0.0004726786 0.0009089163 0.0005172127 -0.0006203935 -0.0006488019 -0.0009181223 0.0041250182 0.0033582721 0.0041311629 -0.0006268662 0.0036150821 0.0017509010 -0.0008818962 -0.0035806192 0.0017183395 -0.0012049678 -0.0007698228 0.0010982248 0.0004567200 -0.0010315783 0.0002148761 -0.0005157324 0.0003402323 -0.0001153402 0.0041200106 -0.0038906172 -0.0046015829 0.0005708657 -0.0005679800 0.0043304026 -0.0023320306 -0.0021192163 0.0011981556 0.0052561011 -0.0084416015 -0.0062343923 -0.0033884820 0.0036379173 0.0022698351 0.0058848957 -0.0089389442 -0.0076120885 0.0001228869 0.0101617284 0.0123260545 0.0023456203 -0.0049363827 -0.0044881943 -0.0081342509 0.0094089234 0.0063314368 -0.0015919539 0.0034808651 0.0044651340 -0.0096732111 0.0049111251 0.0005718038 0.0001902055 -0.0080827599 -0.0138395640 0.0030383463 -0.0058530493 -0.0059168473 0.0126384028 -0.0109568397 -0.0053646105 -0.0075405472 -0.0035343104 0.0008005761 0.0046390066 0.0025359472 0.0012099000 -0.0041424762 -0.0009532519 0.0030005001 0.0068088919 0.0029292782 -0.0014183349 -0.0044673008 -0.0029914544 -0.0022172716 0.0086813178 0.0033923579 -0.0028926827 0.0003436285 -0.0006820492 -0.0057636998 0.0014688111 -0.0019703695 -0.0046346401 -0.0064832413 -0.0025601663 0.0015046443 0.0007620555 0.0018640611 0.0056397250 -0.0017033396 0.0041418115 0.0063061690 0.0022994373 0.0015341534 0.0041809353 -0.0001371173 0.0013696069 0.0024896436 -0.0009257732 0.0002045198 0.0009947003 0.0005663935 0.0001078493 -0.0002076410 -0.0014356688 0.0011138058 -0.0001573903 -0.0066530962 0.0023466240 0.0001558914 0.0052862517 -0.0036349495 0.0005214175 0.0070638016 0.0016833873 -0.0017491887 0.0001128351 0.0076118364 -0.0028793093 0.0060214985 0.0004481135 -0.0012673902 -0.0047258909 -0.0013525809 0.0013454267 -0.0063747977 0.0021247194 0.0006152536 0.0001307119 0.0067247541 -0.0024738573 -0.0005624396 -0.0006449704 -0.0004048294 0.0001728004 0.0000013798 0.0003265835 0.0016058537 0.0002945340 0.0023443908 -0.0011832004 0.0002497316 -0.0020660617 -0.0015939721 -0.0012658587 -0.0015065957 -0.0004446763 -0.0030409628 0.0015531893 -0.0021689603 -0.0016058637 -0.0019984126 0.0018470077 0.0020547337 0.0012043776 0.0019482159 -0.0001085395 0.0029788081 -0.0005674560 -0.0032579391 0.0016815832 0.0000490893 -0.0018943532 0.0012876564 -0.0039345772 -0.0025425676 0.0022656183 0.0020220183 0.0050578529 -0.0049019442 -0.0040485472 -0.0074474691 -0.0026429642 0.0007092620 -0.0010782384 0.0012591615 0.0050249749 -0.0101685913 -0.0053355550 -0.0065545043 0.0014523435 -0.0036026317 0.0097587115 -0.0030392589 0.0016964545 -0.2063021494 0.0047447094 0.0157738314 -0.1647282934 0.0688139847 -0.0041149678 0.1542713017 0.0240960397 -0.0263512569 -0.0725648269 0.0321877997 -0.0114837641 0.0980159995 -0.0444829014 0.0145244992 -0.0187436296 -0.0171065199 -0.0097467402 0.0192614492 0.0109483762 0.0106564664 -0.0177129112 -0.0024652777 -0.0208125840 0.0289082207 0.0122079079 0.0265751307 0.0223797258 0.0123952510 0.0132450062 0.0000097685 0.0022104784 0.0007252147 -0.0119182789 0.0039246781 0.0006353965 0.0002237414 -0.0024490737 -0.0007336510 0.0008124408 0.0012846676 -0.0000667316 -0.0006574615 0.0017191739 -0.0004275660 -0.0550792821 0.0525327270 0.0624532350 -0.0080840843 -0.0331914734 -0.0054795808 0.0290503281 0.0028222213 -0.0168636785 -0.0413286829 0.0091773208 0.0317546334 -0.0198385641 0.0225132785 0.0192429934 -0.0426501174 0.0199374185 0.0335085701 0.0200893526 -0.0306496514 -0.0243382186 0.0505443345 -0.0217759362 -0.0363478218 -0.0197384123 -0.0269475419 0.0071047384 0.0447828663 -0.0148764582 -0.0324277985 0.0207203916 0.0513513191 0.0064658086 0.0236511917 -0.0093437762 -0.0230054480 -0.0169353904 0.0060039945 0.0153113182 0.0144789073 -0.0181619613 -0.0186573291 0.0041626354 -0.0010247752 -0.0013526319 0.0000023463 -0.0008871049 -0.0001497491 -0.0001504463 -0.0017350336 -0.0003129768 -0.0005191169 -0.0007868799 0.0001351953 -0.0008602227 0.0006827539 0.0006513304 -0.0001026733 0.0026884058 0.0004546868 -0.0013698936 -0.0011658230 0.0006595390 -0.0013182257 -0.0072919308 -0.0026412864 -0.0000871384 0.0000152550 -0.0020196313 -0.0003530773 -0.0032749914 -0.0003151912 -0.0003024772 -0.0013584193 -0.0001594841 -0.0060565687 0.0086626952 0.0028975631 -0.0017406414 -0.1089921647 0.0015967765 -0.0420215101 -0.0298354875 -0.0259069559 0.0001456708 0.0132686801 0.0071742410 -0.0056443106 -0.0185029861 -0.0102747642 0.0057033821 0.0052227521 0.0011389042 -0.0000828852 -0.0001824109 0.0001635783 -0.0000789404 0.0004982408 -0.0002071957 0.0005260694 -0.0000210787 -0.0005050496 -0.0001807352 0.0001166793 -0.0002092411 -0.0004941477 0.0021063216 0.0016553578 -0.0004796166 -0.0003565003 -0.0000278883 -0.0020224545 -0.0035328316 0.0021095508 -0.0009770741 0.0011099318 0.0011642727 0.0007380025 -0.0025184011 -0.0016143906 -0.0026005118 -0.0019512266 -0.0026118160 0.0007025802 0.0027434226 0.0074458042 -0.0084891774 -0.0003590073 0.0014840889 -0.0010098279 -0.0004448034 0.0010361863 0.0006365300 -0.0016186205 0.0000343762 -0.0000001798 0.0004511683 0.0001364482 -0.0026079767 -0.0015031481 -0.0016228568 -0.0001984574 0.0028740527 0.0015265475 -0.0015428858 -0.0026545479 0.0005525647 0.2074120356 -0.0832537060 0.0264653628 -0.2382625792 0.0504072824 -0.0707543826 0.1653217687 -0.0940050965 -0.0311236769 -0.0942065151 0.0197434050 -0.0136066071 0.2002125793 -0.0407564016 0.0459576997 -0.1860621419 0.1232947378 0.0450123488 0.2880262250 0.0061024959 0.1702333221 -0.0640867025 0.1258034461 0.1265588611 -0.0321088296 -0.0051066842 -0.0208279911 -0.1647053903 -0.0331629054 -0.1080280482 0.1241672579 -0.1867541106 -0.1453914760 0.0577001294 0.0301767429 0.0060606285 -0.0427604570 -0.0307776555 -0.0376108660 0.0215247760 0.0142697225 0.0164445868 -0.0494167645 -0.0262082067 -0.0064668047 0.0446504897 0.0354259532 0.0413971292 -0.0616909903 -0.0203034637 0.0351059060 0.0201210250 0.0245375208 0.0560315556 0.0018859872 0.0063734292 0.0098971368 0.0457100045 0.0125580895 -0.0315661719 -0.0300209753 -0.0346773965 -0.0650443903 0.0029033351 -0.0024343319 -0.0024686800 0.0228591614 0.0085413110 0.0211359684 -0.0004827802 -0.0050577521 -0.0087340676 -0.0009129833 -0.0003780666 0.0000322700 0.0347503692 0.0011464658 -0.0055261839 -0.0457815856 0.0254414180 -0.0013556683 -0.1745975649 0.0568822893 0.0058606341 0.1338092253 -0.0893027495 0.0119900081 0.1853430171 0.0383098852 -0.0432316320 0.0075346376 0.1861426001 -0.0714608934 0.1560423323 0.0119544976 -0.0331734350 -0.1205605659 -0.0369460265 0.0353210530 -0.1668733567 0.0567955951 0.0171931841 0.0040164913 0.1706572936 -0.0631217989 0.0076714433 -0.0001758928 0.0128213139 -0.0071266360 0.0050509554 -0.0152915712 -0.0264819678 -0.0018845252 -0.0415158046 0.0193443883 -0.0097364977 0.0383280895 0.0313054980 0.0287279192 0.0313206733 0.0056033926 0.0497908028 -0.0285510111 0.0309493287 0.0194414884 0.0314433920 -0.0242667468 -0.0227726968 -0.0192325266 -0.0292525984 -0.0027492829 -0.0405064345 0.0048088262 0.0423433291 -0.0258565418 -0.0000359157 -0.0011867982 0.0001004710 -0.0058326332 -0.0064423332 0.0048069285 0.0022276111 0.0034923493 -0.0026708709 -0.0033746628 -0.0059142561 -0.0032337540 0.0001229301 -0.0009383491 -0.0000163696 0.0010921877 -0.0075875404 -0.0038222082 -0.0065656242 0.0009001112 -0.0036651420 0.0134217031 -0.0034874541 0.0010412784 -0.0580240463 -0.0004701946 0.0048423483 -0.0499502475 0.0210299101 -0.0007958938 0.0441091607 0.0080530410 -0.0079429189 -0.0119945745 0.0106829188 -0.0015077302 0.0243965737 -0.0092296742 0.0018287772 0.0579444790 0.0498837584 0.0410437442 -0.0398447994 -0.0387749989 -0.0246922260 0.0715438498 0.0053874575 0.0878436902 -0.1129138571 -0.0406310051 -0.1087294855 -0.1030833298 -0.0590562602 -0.0643192472 -0.0076976314 -0.0031189414 -0.0077674269 -0.0045037308 -0.0000911300 -0.0001988033 -0.0005866400 0.0004686235 0.0006306191 0.0006208322 0.0003096553 -0.0007089731 0.0002130687 -0.0002640352 -0.0001198516 0.0002513215 -0.0016511596 -0.0011356468 -0.0003507886 -0.0051439993 -0.0011029348 0.0015992393 -0.0021567777 -0.0018988116 -0.0012954939 0.0053291035 0.0029553045 -0.0019088044 0.0065537054 0.0033627489 -0.0046045974 0.0038324936 0.0042284940 0.0013687700 -0.0077262380 -0.0037392489 0.0050565189 -0.0055279561 -0.0047355862 -0.0019119239 -0.0064236397 -0.0011219949 0.0073603954 -0.0007906254 -0.0045801571 0.0008687025 0.0091385776 0.0022920069 -0.0013593666 -0.0005629165 0.0011027596 0.0026233177 -0.0012639365 -0.0028462629 -0.0013705161 0.0018160295 0.0036872961 -0.0048025015 0.0058682965 0.0030785935 0.0029202307 -0.0032160392 -0.0016733863 0.0074916501 -0.0068389737 -0.0041323125 0.0024418293 -0.0094265853 -0.0024322457 -0.0064925402 0.0066097256 0.0037625230 -0.0024622972 0.0081887185 0.0021970203 -0.0112787838 0.0048644566 0.0053721679 0.0033586687 0.0137512366 0.0007291120 0.0099236213 -0.0036000364 -0.0055107747 -0.0037183649 -0.0084632793 0.0002716411 0.0011925843 -0.0051427302 -0.0012596192 -0.0005749713 0.0013458027 0.0003635122 -0.0000515304 -0.0139368697 0.0005333810 0.1773368934 0.1265150017 0.1123025301 -0.0001741449 -0.0022737754 -0.0008446509 0.0011903162 0.0031987710 0.0017777640 -0.0012116424 -0.0010505608 -0.0002588922 0.0000729801 0.0000719035 0.0000538448 -0.0004441802 -0.0004385442 0.0000992374 0.0001487448 -0.0000096894 -0.0000417047 0.0000185112 -0.0000025212 -0.0000598810 0.0001275497 -0.0004667117 -0.0003832261 0.0000749140 0.0001838770 0.0000876948 0.0057015497 0.0043622133 -0.0019772758 0.0018757503 -0.0031154327 -0.0024961872 -0.0008466051 0.0041310357 0.0026998463 -0.0008421642 -0.0006623395 -0.0002981392 0.0002083346 -0.0000292732 0.0006741890 -0.0010591904 0.0002113906 -0.0000846408 -0.0001907640 -0.0002384099 -0.0000609710 0.0001696415 -0.0002907615 0.0003527989 0.0002552242 0.0001529579 0.0000787770 0.0002682590 0.0001690605 0.0000171503 -0.0000911736 -0.0005817038 -0.0003617315 0.0003887788 0.0001738409 -0.0000773048 0.0610205430 -0.0249027563 0.0074192049 -0.0710116575 0.0153446912 -0.0206511220 0.0497174546 -0.0287296457 -0.0098886749 -0.0283064729 0.0067204040 -0.0031611234 0.0597200251 -0.0124594430 0.0133655507 -0.0558373400 0.0372299683 0.0136942382 0.0855963564 0.0025347195 0.0505553799 -0.0201376441 0.0381210516 0.0378666437 -0.0088654386 -0.0019947097 -0.0066825095 -0.0488744958 -0.0102541538 -0.0325683668 0.0379574215 -0.0566050965 -0.0437091452 -0.2471927178 -0.1296688626 -0.0274910627 0.1838205081 0.1330650000 0.1643342054 -0.0918197477 -0.0625298420 -0.0753224484 0.2116477734 0.1129075317 0.0295396579 -0.1925731011 -0.1529666947 -0.1798569971 0.2658430730 0.0853947747 -0.1515785149 -0.0895947934 -0.1062421379 -0.2415076784 -0.0093230072 -0.0236105327 -0.0342334027 -0.1948189056 -0.0535859252 0.1382370832 0.1324785170 0.1506007457 0.2828748154 0.0006250404 -0.0004324584 -0.0003317611 0.0065121730 0.0025369051 0.0062228558 0.0019990377 0.0192004837 0.0329352565 0.0051037144 0.0011989954 -0.0019213926 0.0033877747 -0.0061050134 0.0017764421 -0.0088579137 0.0131775585 -0.0038463406 -0.0373186125 0.0151216714 0.0001038488 0.0296536436 -0.0238990187 0.0042505655 0.0407874969 0.0111255570 -0.0107526141 -0.0014677300 0.0421995749 -0.0157108517 0.0284382565 -0.0004138591 -0.0049547142 -0.0210777520 -0.0021581806 0.0045265033 -0.0281339237 0.0062341645 0.0024022045 -0.0023304307 0.0306435728 -0.0106071673 -0.0217523360 -0.0217306488 -0.0181680963 0.0122447088 0.0020092481 0.0191947838 0.0613090003 0.0110322221 0.0901010472 -0.0445420107 0.0105644527 -0.0788169141 -0.0667809634 -0.0529393798 -0.0674710946 -0.0171603765 -0.1127555739 0.0568695157 -0.0814180479 -0.0586947906 -0.0763990179 0.0676330513 0.0738329786 0.0452002745 0.0742120534 -0.0010831456 0.1110024109 -0.0198493041 -0.1182109851 0.0624627763 0.0003149089 0.0002118210 -0.0000510706 -0.0004844895 0.0017257605 -0.0010886797 -0.0007436387 -0.0018089714 0.0006817412 -0.0010080331 0.0014909493 0.0010388879 -0.0002736130 0.0001403640 -0.0000157806 0.0016540527 0.0045459560 0.0005677591 0.0037687497 -0.0011672356 0.0023830702 -0.0043237055 0.0013607096 -0.0011700666 0.0053073319 0.0006189751 -0.0007315760 0.0006184646 -0.0020678416 0.0005151807 -0.0019093822 -0.0012128441 0.0006763707 0.0014091890 -0.0009930197 0.0004421092 -0.0052357942 -0.0005943194 0.0004078933 -0.0008523192 0.0009556083 -0.0023339017 -0.0002879419 0.0002248909 -0.0004812298 0.0016931463 0.0005735321 0.0016763402 -0.0021415858 -0.0016656583 -0.0010009643 -0.0023202777 -0.0005093081 -0.0018358402 0.0020468570 -0.0015479030 0.0018985654 0.0023695152 0.0011898222 0.0008114284 -0.0013488000 0.0023520303 -0.0057204857 -0.0014869361 -0.0019179471 0.0028093280 0.0064783284 -0.0017136235 0.0067267913 -0.2245585990 0.2609760572 0.2839412916 -0.2200384646 -0.1227086002 0.0868380364 0.1786368864 0.2057545528 -0.0379951221 -0.2281588820 -0.2634173587 0.0534298635 -0.0657598250 -0.2652109071 -0.0506600327 -0.0857671030 -0.0905359144 0.0202899725 0.0766003626 0.2399589985 0.0400219792 0.1317717480 0.2050339819 -0.0092734809 -0.0962651404 0.2871317714 0.1494818139 -0.0100554475 -0.1436679009 -0.0436081716 0.0970615285 -0.1887052862 -0.1398490538 0.1226757048 0.0066838215 -0.0964838725 -0.1033323106 0.0261996569 0.0842465053 0.0517673357 -0.1021285931 -0.0649867857 0.0551657117 -0.0173201464 -0.0260986906 -0.0222855507 -0.0029910400 0.0088594883 -0.0370621752 0.0113689506 0.0168935910 -0.0158947554 0.0203374667 0.0097233540 0.0258919855 -0.0164017775 -0.0133776424 0.0136696427 -0.0046492026 -0.0061683558 0.0309004561 -0.0342353305 -0.0168170905 -0.0218539300 -0.0745604592 -0.0061268776 -0.0292651396 0.0190267567 0.0161874757 0.0161624357 -0.0020590528 -0.0070542701 0.0102941275 0.0183580502 -0.0018561302 -0.0330381085 -0.0277109884 -0.0008395759 0.0370333898 -0.1402687985 0.0185554598 0.0065844890 0.0045437330 0.0023556496 0.0002417752 0.0227055600 0.0135753258 -0.0061283279 -0.0312221280 -0.0193519658 0.0081604719 0.0076026981 0.0021343237 0.0001233833 0.0004572583 -0.0002771022 -0.0002543964 -0.0006734177 0.0001411750 -0.0006191124 -0.0005963347 0.0009487406 -0.0003580547 -0.0002864991 0.0002522806 -0.0019985374 0.0038009677 0.0036942048 -0.0009615451 -0.0003878016 0.0000872951 -0.0007736541 0.0032381170 -0.0019684540 -0.0012377228 0.0018885051 -0.0002127587 0.0005548592 0.0006468741 0.0012890416 -0.0019857105 -0.0015674841 -0.0014024544 0.0003063529 -0.0051356331 -0.0018030703 0.0055620007 0.0069695730 -0.0063117036 0.0000050628 -0.0000651281 -0.0003198566 0.0002560546 -0.0011756819 -0.0012717526 0.0002093271 0.0012403592 0.0009139206 -0.0015700113 -0.0035105630 -0.0038713527 -0.0009047544 0.0018247575 0.0019093268 -0.0012563477 -0.0042173247 0.0000031631 -0.0065900801 0.0033730365 0.0002194989 0.0080206402 -0.0023450366 0.0012975763 -0.0066370069 0.0048600506 0.0022868325 0.0029331081 -0.0023487811 -0.0015954254 -0.0064408138 0.0020414244 -0.0006112013 0.0067624506 -0.0049791622 -0.0021036827 -0.0094322150 -0.0036869521 -0.0033591557 0.0057847133 -0.0096979125 -0.0042001465 0.0022140237 0.0008544454 0.0020091083 0.0052404049 0.0019275177 0.0045392474 -0.0054793138 0.0072984085 0.0051619511 -0.0096478637 -0.0049625823 -0.0003572370 0.0067752593 0.0045281334 0.0047746352 -0.0047916153 -0.0023797648 -0.0004969073 0.0091786841 0.0047019507 0.0001664713 -0.0073961966 -0.0056338845 -0.0059254084 0.0102285866 0.0041932914 -0.0051448650 -0.0019372071 -0.0027063491 -0.0083223272 0.0021204517 -0.0001584827 -0.0013157189 -0.0068530451 -0.0052828185 0.0054490324 0.0046407439 0.0062949501 0.0115825215 -0.0002165527 -0.0000687765 -0.0001565919 -0.0014401963 -0.0005495109 -0.0014155126 -0.0003139269 0.0002533079 0.0002905856 -0.0013031255 0.0001630947 0.0006222508 -0.0062538117 0.0004896787 0.0007443519 0.0057662494 -0.0017605608 -0.0002835992 0.0121571904 -0.0033410071 -0.0006592437 -0.0084846036 0.0051753886 -0.0005772318 -0.0135772432 -0.0018457575 0.0028518209 -0.0009851328 -0.0114756832 0.0045436874 -0.0116239183 -0.0007304531 0.0024062127 0.0084668399 0.0030004650 -0.0026333551 0.0128132753 -0.0038405022 -0.0013736903 -0.0000943516 -0.0111210182 0.0041602106 0.0019696182 0.0011862020 0.0022148336 -0.0024844450 -0.0010516639 -0.0028008539 -0.0029141514 -0.0005368340 -0.0042528899 0.0019083998 -0.0007944372 0.0036358486 0.0031064796 0.0023374709 0.0031426053 0.0006307119 0.0046650915 -0.0024150254 0.0035073759 0.0021652617 0.0035941228 -0.0025084728 -0.0024740418 -0.0018978813 -0.0036612330 -0.0005097395 -0.0049335015 0.0004617084 0.0042360320 -0.0025774944 0.0005734007 -0.0012716919 -0.0003428980 -0.0163524355 -0.0159709503 0.0128459263 0.0027223204 0.0028828391 -0.0055813308 -0.0096406623 -0.0124350207 -0.0080897033 -0.0010745411 -0.0016895841 0.0001364497 0.0159801304 -0.0011055331 -0.0120068967 0.0083057072 -0.0100014268 0.0038942586 0.0200513139 -0.0018413425 -0.0032767368 0.1051960926 0.0047101164 -0.0103292104 0.1756367659 -0.0338101491 -0.0120258317 -0.1410354850 -0.0000437395 0.0160081732 0.0678536784 -0.0213732284 -0.0053754286 -0.0512035350 0.0344800439 -0.0109110450 -0.0775022754 -0.0783552314 -0.0413810010 0.0885709605 0.0637240706 0.0822714240 -0.1447258403 -0.0445018922 -0.1567475796 0.1028316589 0.0237174533 0.1140472860 0.1980381040 0.0817799232 0.1723888148 0.0029854540 0.0059040975 0.0024530264 0.0020145383 -0.0034974785 0.0002636473 0.0038716961 -0.0003429156 0.0009763179 -0.0029644027 -0.0010500021 0.0014189792 -0.0015026697 0.0008177962 -0.0024210492 0.0000753351 0.0016105983 0.0014625616 -0.0055887838 -0.0002858611 0.0024637050 0.0035097229 0.0061470857 0.0000069588 -0.0047980422 -0.0088506604 -0.0001584620 -0.0007721546 -0.0102005129 -0.0030330268 0.0001889459 -0.0038929750 -0.0014938053 0.0010199669 0.0089508024 0.0026458501 0.0021977318 0.0093740728 0.0018851043 -0.0012120404 0.0127023939 0.0056646637 -0.0046892133 -0.0025088036 0.0016518625 0.0017484346 -0.0086561217 -0.0041747497 0.0012808759 0.0012115912 -0.0005571434 -0.0009629831 -0.0002579726 0.0006234393 -0.0007391468 -0.0007429666 0.0007075959 0.0007681923 -0.0000929432 -0.0003931248 -0.0003544667 -0.0000428058 0.0001473532 -0.0005910342 0.0002004977 0.0002812337 -0.0002692229 0.0003710401 0.0001329858 0.0003947830 -0.0002503977 -0.0002544818 0.0002290927 -0.0000900398 -0.0000994118 0.0006248303 -0.0006179811 -0.0003077883 -0.0000980122 -0.0018163659 0.0003844909 -0.0001957473 0.0001373173 0.0009829087 0.0002951977 -0.0000760256 -0.0001089606 0.0001959640 0.0003055722 -0.0000443428 -0.0004112061 -0.0019012670 -0.0003623114 -0.0043777437 -0.0030162633 0.0035012985 -0.0300330649 -0.0215413163 -0.0323578992 -0.0000577997 -0.0005699840 -0.0001464626 0.0008707232 0.0007921986 0.0001361154 -0.0005278834 -0.0003659534 0.0000004095 0.0000918271 -0.0000059508 -0.0001952488 -0.0000848314 -0.0004421687 0.0002091275 -0.0002962597 0.0004607859 0.0001111384 -0.0000058673 0.0000354649 0.0001805682 -0.0002400808 0.0000505097 0.0001457174 0.0000168259 -0.0000509710 -0.0000393282 0.0014636075 0.0040490584 -0.0018812799 0.0004495938 0.0000660968 -0.0017282754 -0.0008555541 0.0016266730 0.0010441738 -0.0012700756 -0.0005267968 0.0022048651 0.0008227993 -0.0052425768 -0.0024333635 0.0047451067 -0.0006703680 -0.0002245910 0.0001083857 0.0000543941 -0.0002282236 0.0000080108 0.0001045666 -0.0004379560 -0.0001639316 -0.0000469232 0.0000267853 0.0003867284 0.0000828580 0.0001681425 -0.0000470213 -0.0005040087 -0.0003150328 0.0002776600 0.0002006555 -0.0002624907 -0.0383720437 0.0143759646 -0.0037733563 0.0237784617 -0.0039511864 0.0082188115 -0.0138209898 0.0085548041 0.0030058035 0.0071689317 -0.0027520510 -0.0003444646 -0.0176928200 0.0043805850 -0.0035578723 0.0199818590 -0.0132501035 -0.0060933682 -0.0310328347 -0.0009993886 -0.0138227765 0.0056805600 -0.0106275280 -0.0097617633 0.0049092293 0.0042112760 0.0084754592 0.0132821642 0.0036357093 0.0104034817 -0.0184478257 0.0202452620 0.0186370613 0.0173868821 0.0085567128 0.0070775386 -0.0119078795 -0.0100929127 -0.0143212060 0.0015599209 0.0033533579 0.0094442861 -0.0048170293 -0.0041052412 -0.0043269981 0.0094560968 0.0108082357 0.0189353751 -0.0307362850 -0.0010395331 0.0151954646 0.0084395491 0.0089430432 0.0167693739 -0.0088512378 0.0085052319 0.0198156018 0.0037358602 0.0000957074 -0.0071711844 -0.0174562569 -0.0094987858 -0.0154792041 0.0004068277 -0.0016870634 -0.0025698844 -0.0042184671 -0.0018974611 -0.0044420875 0.0003223832 -0.0062186034 -0.0111088815 0.0074797359 -0.0008910773 -0.0056014563 0.1498837095 -0.0010687979 -0.0214362264 -0.1243841409 0.0014990556 0.0212982021 -0.1562738464 0.0273205452 0.0146498126 0.0954094195 -0.0430543580 0.0006030930 0.1771825253 0.0044562674 -0.0284110653 0.0251204900 0.1190238739 -0.0492311136 0.1664347496 0.0137112936 -0.0361212001 -0.1138909394 -0.0535212013 0.0403337180 -0.1966567059 0.0583367558 0.0206033845 0.0060525755 0.1428962149 -0.0530374213 -0.1150349635 -0.0504504358 -0.1423916045 0.1486273163 0.0570477216 0.1690773820 0.1353336955 0.0282486477 0.1953788013 -0.0818891351 0.0374225267 -0.1589475233 -0.1621246211 -0.1149205767 -0.1792887608 -0.0302599856 -0.1910270230 0.0949996944 -0.1533094300 -0.0860757781 -0.1643477186 0.1006521053 0.0935347074 0.0808234211 0.1687393775 0.0383562071 0.2146804675 -0.0120929891 -0.1613058746 0.1076898909 -0.0000708519 0.0001186438 -0.0000464610 0.0006068707 -0.0003445216 0.0002316508 -0.0000059066 0.0000017309 0.0001967518 0.0003282605 -0.0001027919 -0.0002807534 -0.0000902116 0.0001068901 -0.0001775220 0.0005539573 0.0012603654 -0.0001755527 0.0023266251 -0.0013416970 0.0013185187 -0.0006609037 0.0001340739 0.0002123189 -0.1881700868 -0.0101671655 0.0212103676 -0.2841514020 0.0568719820 0.0160686116 0.2409299896 0.0004694058 -0.0275714645 -0.1670044863 0.0254151305 -0.0067050427 0.1130753735 -0.0590457180 0.0213490118 -0.0699409313 -0.0621030764 -0.0395148237 0.0966171370 0.0528713365 0.0727381162 -0.1082863132 -0.0331714079 -0.1176225092 0.0792695585 0.0174929066 0.0908150553 0.1421209332 0.0588996515 0.1208743460 0.0017067774 0.0059317783 0.0022574265 -0.0051969359 0.0076585494 0.0004112504 0.0010677023 -0.0049690703 -0.0022257991 0.0000839393 0.0013871943 0.0005534531 -0.0003466530 0.0010462421 0.0010018841 -0.0008965223 0.0006248157 0.0000793406 0.0017969611 0.0016806111 -0.0011615353 -0.0011718427 -0.0013768167 0.0002807651 0.0007872448 0.0017442266 0.0001414993 0.0003716378 0.0019254083 0.0004392470 0.0005858916 0.0006267292 -0.0001176591 -0.0003635971 -0.0016173871 -0.0003879198 -0.0004532204 -0.0017083771 -0.0003007387 0.0005880428 -0.0020966229 -0.0009400360 -0.0013152264 0.0016406181 0.0010114080 -0.0004191821 0.0015475881 0.0012372130 0.0003746465 -0.0004183989 -0.0004656859 -0.0003512852 0.0000767503 0.0004442781 0.0001677973 -0.0002980800 -0.0008083867 -0.0003160294 0.0004181866 0.0001987687 0.0002290092 -0.0002139606 -0.0001306960 0.0005263236 -0.0005050763 -0.0003039182 0.0002569764 -0.0008852677 -0.0001718992 -0.0004931687 0.0004871528 0.0003947513 -0.0001790387 0.0005673333 0.0001495553 -0.0008693279 0.0003642780 0.0003731631 -0.0001805539 0.0028259103 -0.0007634148 0.0004676688 -0.0001246517 -0.0021044658 -0.0002807317 -0.0005172363 -0.0000112989 0.0000636735 -0.0003936555 -0.0000936771 0.0000883628 0.0004187135 0.0000885371 0.0004347715 -0.0011628444 -0.0009449104 -0.0225895232 -0.0156813964 -0.0244297976 0.0000995204 0.0013361354 0.0006411602 -0.0012599329 -0.0021195736 -0.0009046749 0.0010241984 0.0008085354 0.0001406794 -0.0001731352 -0.0000457899 0.0000460577 0.0001882606 0.0001919227 -0.0002183773 0.0001871726 -0.0006479692 -0.0000043002 0.0000303775 -0.0000335526 -0.0000687431 0.0001409242 0.0001739682 0.0000481633 -0.0000323153 -0.0000514861 -0.0000156209 -0.0022268388 -0.0019925768 0.0008893124 -0.0008654351 0.0002384370 0.0023174744 0.0009954335 -0.0008534415 -0.0003483881 0.0026376942 0.0015056124 -0.0021314730 -0.0015423127 0.0072909485 0.0018626877 -0.0039789910 -0.0000564124 0.0006303713 -0.0000273730 0.0000104220 0.0002027104 -0.0001093579 0.0001609541 0.0000332126 -0.0001849394 0.0000713106 -0.0000111488 -0.0006736472 -0.0001222075 -0.0001422071 0.0000665021 0.0008093450 0.0003377010 -0.0004438589 -0.0002833964 0.0002547917 0.0654618513 -0.0232440711 0.0057907904 -0.0374672125 0.0058432871 -0.0134525412 0.0209326891 -0.0133186320 -0.0047687766 -0.0109333738 0.0049304045 0.0014161222 0.0276231281 -0.0071225964 0.0054535531 -0.0321644761 0.0211307690 0.0099649698 0.0493397750 0.0004282208 0.0225973253 -0.0087076899 0.0155448056 0.0144611542 -0.0085307973 -0.0100142717 -0.0188639257 -0.0206445122 -0.0058997824 -0.0167496582 0.0303381385 -0.0318989070 -0.0309499309 0.0129359135 0.0062803673 0.0050250490 -0.0087179209 -0.0070537684 -0.0091555627 0.0021384707 0.0020579780 0.0042807472 -0.0035399209 -0.0026982266 -0.0020215881 0.0061877345 0.0072712465 0.0129594908 -0.0234578478 -0.0012221366 0.0113330808 0.0048233772 0.0058013600 0.0122699307 -0.0106660390 0.0086149176 0.0214474159 0.0032646173 0.0006456500 -0.0037936131 -0.0116079516 -0.0060400824 -0.0095672202 -0.0014238834 0.0044994491 0.0066598328 0.0081372695 0.0038970731 0.0089130352 0.0005561772 -0.0062228749 -0.0113358482 0.0085063784 -0.0009671654 -0.0064350698 -0.2297198217 0.0169593039 0.0274714067 0.1999819679 -0.0142965816 -0.0266601758 0.2177522567 -0.0397005461 -0.0198490979 -0.1290593785 0.0647721271 -0.0033761008 -0.2504688276 -0.0066722196 0.0410287699 -0.0309840133 -0.1595453397 0.0652051869 -0.2253639862 -0.0105793283 0.0455691500 0.1462924041 0.0620913577 -0.0493960591 0.2705167332 -0.0719102899 -0.0393074574 0.0011135504 -0.1778416038 0.0654001124 -0.0844938575 -0.0443044882 -0.0946190841 0.1029430105 0.0488411443 0.1097781475 0.0824271984 0.0224496133 0.1144326582 -0.0473399498 0.0164810111 -0.0879128113 -0.0941502146 -0.0651551231 -0.1149967561 -0.0208062271 -0.1056496889 0.0474079762 -0.0952935015 -0.0546785579 -0.1012119819 0.0616562508 0.0609254556 0.0465417563 0.1057592175 0.0237555362 0.1358430013 -0.0084176035 -0.0969538585 0.0625559522 -0.0001023786 -0.0001162867 -0.0000031764 0.0001792482 -0.0009343633 0.0005642023 0.0004078454 0.0008564107 -0.0000174509 -0.0000330177 -0.0007191154 -0.0004206364 0.0001009236 -0.0001329935 -0.0001374580 -0.0005674370 -0.0013619513 -0.0003140738 -0.0014863203 0.0013010496 0.0000724858 0.0012295832 -0.0011549373 0.0012411405 -0.0225685120 -0.0116737802 -0.0025125122 -0.0190154749 0.0065743701 -0.0091542134 0.0189479054 0.0049002831 -0.0027113306 -0.0117095593 0.0014653598 0.0005582683 0.0116692431 -0.0008047577 0.0008526848 -0.0008694426 -0.0009177380 -0.0001163063 0.0023764690 0.0008234965 0.0011544664 -0.0014271626 -0.0005101930 -0.0015174671 0.0008603788 0.0002147948 0.0011370330 0.0017005978 0.0007684034 0.0016548946 -0.0003479949 0.0002947487 -0.0003916052 -0.0011768526 0.0001500015 -0.0003545615 -0.0000952648 -0.0004540213 0.0004728373 0.0003420925 0.0001096476 -0.0004965539 -0.0009177231 0.0001561800 -0.0008199777 0.0103273755 -0.0056529606 0.0027164002 0.0025590677 0.0013309982 -0.0005307503 -0.0023325447 -0.0022520653 0.0006067064 0.0047939474 0.0024913265 -0.0022377720 0.0010290153 0.0034305167 0.0004156799 0.0014346180 0.0006726273 -0.0006813780 -0.0013089626 -0.0018820175 0.0000999820 -0.0037916502 -0.0044819263 0.0010356110 0.0019400312 -0.0047264635 -0.0015319014 -0.0001770464 0.0014139321 0.0010656407 -0.0013109336 -0.0002395284 0.0014370090 -0.0019970603 -0.0000664368 0.0007824358 -0.0020281461 0.0024534494 0.0018717099 0.0058688289 -0.0034127183 -0.0024155602 0.0110352491 -0.0100642576 -0.0062747032 -0.0082021014 0.0011582351 0.0037369770 -0.0125190414 0.0097224644 0.0068314885 -0.0066412747 0.0166405749 0.0041245672 0.0117237145 -0.0065246674 -0.0093236545 0.0051620327 -0.0082778753 -0.0030351906 0.0194572770 -0.0110013938 -0.0094443720 0.0007361693 -0.0667930118 0.0144819640 -0.0025710935 0.0010849898 0.0556440644 0.0069269245 0.0079261766 -0.0014243945 0.0058470380 0.0121168381 -0.0023879114 0.0016945731 0.0020368434 -0.0004935364 -0.0070278599 -0.0029356927 0.0091956510 0.0006870134 0.0002339796 -0.0007083130 -0.0003444564 -0.0089733546 -0.0053945129 0.0053987037 0.0144372761 0.0072171165 -0.0053279853 -0.0047956908 -0.0010224032 0.0000610052 0.0006689626 0.0004390189 0.0001500869 -0.0002783553 -0.0002455369 -0.0027437955 0.0002540786 -0.0031794947 -0.0004661665 -0.0008469307 0.0004394785 0.0001649785 -0.0018824681 -0.0012517505 0.0000282589 0.0006203093 0.0001470997 0.0009320159 -0.0019072829 0.0004565619 -0.0001650359 -0.0000159246 0.0008511783 0.0003109030 0.0005725078 0.0003683295 0.0270139891 0.0190990044 0.0297508149 -0.0059319616 0.0112015887 -0.0027964954 0.0161356719 -0.0203301397 0.0100421338 0.0079253090 0.0054413979 -0.0084583647 -0.0034479147 0.0062209923 -0.0010238913 0.0047138492 -0.0056726682 -0.0013423917 0.0062289479 0.0024035330 0.0031557551 0.0000027152 -0.0041884310 -0.0005503454 0.0026376894 0.0043495424 -0.0012060082 0.0444595000 0.0745184883 0.1043887355 -0.0848508016 -0.0291617381 -0.0769506822 0.0104299701 0.0893988824 0.1090245474 -0.0808329920 -0.1693355184 -0.2400997609 0.0715356572 0.0648763992 0.1081217068 0.0198560519 -0.0735485640 -0.0702576716 0.1694261091 -0.0565269411 0.0230553538 0.1752026488 -0.0187546729 0.0441454189 0.1769611737 0.3438230837 0.5890159598 -0.1401811698 0.0949972945 0.0531088930 -0.1272205801 0.0711855668 0.0056745461 -0.0012692515 -0.0005424667 0.0004629066 0.0006831121 0.0002131727 -0.0004044417 -0.0011895452 -0.0000927810 0.0014350323 0.0012215420 0.0004251725 -0.0006603402 -0.0005848132 -0.0002720200 0.0001022358 0.0016148740 0.0010527092 -0.0002059727 0.0010601010 0.0001041859 -0.0003963986 0.0022904906 -0.0009746712 -0.0030279673 -0.0009118681 -0.0009191953 -0.0001618940 -0.0001901355 0.0000688337 0.0007690480 0.0530902261 -0.1685078802 -0.2443463441 -0.1940958895 -0.1039722484 -0.2278936857 -0.0002380901 0.0007023336 0.0012908012 -0.0015583460 0.0001629885 0.0010958297 -0.0098440629 -0.0022552447 0.0033242388 0.0097715968 0.0027129136 -0.0028951075 0.0046767655 0.0007532995 -0.0011006075 -0.0019240092 -0.0009788425 0.0006304634 -0.0052096306 0.0018579804 0.0004415851 -0.0019149107 -0.0016188112 0.0010674916 -0.0081305629 -0.0009598317 0.0018369454 0.0049602721 0.0035708494 -0.0022153430 0.0107782099 -0.0031078800 -0.0012255163 -0.0006010258 -0.0052248794 0.0021006547 -0.0014062006 -0.0011099479 -0.0010981670 0.0014173334 0.0009951760 0.0012646473 0.0009408649 0.0004146823 0.0011119227 -0.0004603318 -0.0000308514 -0.0007326326 -0.0008548731 -0.0003420520 -0.0010975387 -0.0004290203 -0.0008046814 0.0002984694 -0.0011614108 -0.0007559277 -0.0011780174 0.0007469194 0.0008675076 0.0004389754 0.0012811044 0.0003079787 0.0018836686 -0.0002338530 -0.0010400391 0.0006942879 0.0001158178 0.0008662213 -0.0001550587 0.0038475209 0.0029676885 -0.0021043645 -0.0012070272 -0.0024591258 0.0025257890 0.0008487108 0.0026634589 0.0015833973 -0.0002704089 0.0005897503 -0.0001938968 0.0019055042 0.0042654625 0.0007517092 0.0045973590 0.0013214562 0.0057256214 -0.0090118054 0.0004305936 0.0021305661 0.0038064382 0.0002635813 -0.0005725732 0.0049077385 -0.0009453487 -0.0001518405 -0.0047286758 0.0000772479 0.0005120607 0.0055115400 -0.0003953996 0.0009137564 -0.0032533760 0.0012288037 -0.0005336312 0.0118976938 0.0065791538 0.0117757395 -0.0121990667 -0.0063418260 -0.0107463185 0.0143192810 -0.0012988316 0.0227124198 -0.0131407752 0.0032650963 -0.0338536990 -0.0138682910 -0.0199648997 -0.0133761216 -0.0006597281 -0.0009423838 -0.0012131454 0.0002534519 -0.0002756738 -0.0002336723 -0.0008791783 0.0002948758 0.0008168428 0.0011888655 0.0002952445 -0.0009916451 0.0001071933 -0.0002217305 -0.0005497735 -0.0092625860 0.0137270588 0.0153335918 0.0132462450 0.0362948311 -0.0148133260 -0.0131768035 -0.0048174001 0.0072532660 0.0009364567 -0.0013298470 -0.0010629618 0.0063346764 -0.0021572533 -0.0043581180 0.0161556371 -0.0035336641 -0.0112987300 -0.0045178856 0.0049924073 0.0038956989 -0.0063100544 0.0046965263 0.0052272659 0.0076548546 0.0121871020 0.0004843750 -0.0495751692 0.0249536245 0.0333134719 -0.0014940149 -0.0094151937 0.0100063177 0.0103954981 -0.0030771822 -0.0102595044 -0.0117251216 0.0031561628 0.0118546124 0.0069474584 -0.0119492140 -0.0100878424 0.0048621056 -0.0024174878 -0.0027029486 -0.0014787146 -0.0001588435 0.0006164376 -0.0029788692 0.0008493344 0.0013634768 -0.0013055968 0.0016617784 0.0007846815 0.0017732777 -0.0010988577 -0.0009255619 0.0010419859 -0.0001929069 -0.0004399030 0.0034545596 -0.0035886300 -0.0013161024 -0.0017381906 -0.0057281565 -0.0000738358 -0.0023589952 0.0015750439 0.0017761763 0.0013472466 -0.0005845039 -0.0004602098 0.0007223326 0.0012365430 -0.0001509370 0.0007579928 -0.0017559641 -0.0007848298 -0.0001316323 0.0145534071 0.0044374694 -0.0423283910 0.0098357687 0.1249914434 0.0007757907 0.0029929055 0.0002785289 -0.0024477689 -0.0035745109 -0.0019825104 0.0020217027 0.0017733361 0.0004747955 -0.0004147442 -0.0003800175 -0.0000954468 0.0007037714 0.0001694816 0.0000735207 0.0001935629 0.0001648077 -0.0002395040 0.0000815210 0.0001595551 0.0000459266 0.0000034952 0.0008284611 0.0005281947 -0.0000229687 -0.0006758676 -0.0003628640 -0.0055627576 -0.0013466488 -0.0002671188 -0.0011678693 0.0022085445 0.0017540109 -0.0011481743 -0.0011332721 -0.0015019294 0.0002630063 0.0002336659 0.0001660534 0.0000359718 0.0013679392 0.0014110604 -0.0022465194 -0.0018983572 0.0019324616 -0.0004010851 -0.0002938572 -0.0000093254 0.0001408180 -0.0001240429 -0.0000613360 -0.0003547728 -0.0004078477 -0.0002400729 -0.0004194938 0.0004000604 0.0013410386 0.0006063798 0.0014020074 0.0007064247 -0.0010017006 0.0011137515 0.0001717289 -0.0009904078 0.0007191900 0.0004011634 0.0000925496 -0.0001259403 -0.0000947477 -0.0000874787 0.0005683463 0.0005795842 -0.0001886884 -0.0009456075 -0.0012223319 -0.0000173159 0.0004094366 0.0004142268 0.0005806230 -0.0006599569 -0.0005231758 -0.0000146544 -0.0002745400 -0.0001795617 0.0005518001 0.0000026967 0.0003976143 0.0006723373 0.0022273478 0.0037891868 -0.0006416636 0.0003827368 0.0005468322 -0.0011939409 0.0006896737 0.0006406033 0.0747663066 0.0203243724 -0.0677943048 -0.0241160324 0.0257696828 0.1321446727 0.1131766758 -0.0317867290 -0.2639915250 -0.0764910306 -0.0047770859 0.1118050303 -0.0098501993 -0.0328152733 -0.1010791388 -0.1212690134 -0.0700657504 -0.0289193673 -0.1544911766 -0.0775731753 0.0047397291 -0.3237943007 0.2221272640 0.6027389703 0.1114417565 0.0787884832 0.1034980659 0.1171651555 0.0752754879 0.0595351168 0.0004898220 -0.0011457975 -0.0017152480 -0.0010306340 -0.0005939838 -0.0013774325 0.0234880336 -0.1531413421 -0.2886178060 0.2377089904 -0.0298988364 -0.1907736064 0.0040464089 -0.0010094357 -0.0002330651 -0.0039910204 0.0010229936 0.0001230385 -0.0032675714 0.0007385418 0.0002394179 0.0018443833 -0.0012616558 0.0001725089 0.0039400835 0.0001980659 -0.0006422483 0.0002636330 0.0022246835 -0.0007972540 0.0029822776 -0.0002417702 -0.0004465713 -0.0015937390 -0.0003471734 0.0004079517 -0.0035796335 0.0005050064 0.0008538222 -0.0003741445 0.0018640402 -0.0005360595 0.0063831129 -0.0011313701 0.0108275266 -0.0070821089 0.0012842351 -0.0101364643 -0.0044986659 -0.0006045607 -0.0067886757 0.0019983736 -0.0027572675 0.0053381337 0.0062944631 0.0046878880 0.0075435864 0.0002997855 0.0040435271 -0.0024543284 0.0018581876 -0.0008247383 0.0034926990 -0.0000552372 0.0017916080 -0.0016616091 -0.0034690460 -0.0028368448 -0.0017725944 -0.0014644270 -0.0003262407 -0.0016270909 -0.0024746678 0.0004827803 -0.0008081298 0.0175138689 -0.0171551957 0.0099623016 0.0061272695 0.0130033706 0.0054534967 0.0057579654 -0.0117164403 -0.0090054081 0.0006074993 -0.0004030680 -0.0048500760 -0.0032871409 -0.0175689545 -0.0075397094 -0.0092968102 0.0275321126 0.0232643339 0.0028440507 -0.0288236725 0.0398364884 0.0002647572 0.0001377759 -0.0000718426 0.0003139975 -0.0008641218 0.0001442029 -0.0001289135 0.0001345817 -0.0000025983 0.0004146630 0.0000295244 -0.0000893303 -0.0020684997 -0.0009589876 0.0003740750 -0.0010286327 0.0000366392 -0.0020840327 0.0002848357 0.0001350096 0.0003758742 -0.0001822402 -0.0002383019 0.0000465027 0.0002637562 -0.0000490908 0.0003887744 0.0007347347 0.0010793378 -0.0001053634 0.0022726354 -0.0018201859 0.0028359257 0.0016799794 0.0013650913 0.0017314586 -0.0008288065 0.0025146882 -0.0075526540 -0.0020183527 -0.0015916578 0.0030351642 0.0052672332 -0.0030110411 0.0083285678 -0.0024093016 0.0221428526 0.0154562387 0.0038890032 -0.0028220727 -0.0027485294 -0.0011417217 -0.0003636560 0.0006038107 0.0032253423 0.0041430635 -0.0009806686 -0.0000576430 0.0037644603 0.0008547505 0.0003775932 0.0006618511 -0.0000178448 0.0004646352 -0.0011186941 -0.0008416790 -0.0045835136 -0.0128544112 -0.0009277964 0.0029218942 0.0006737666 0.0022362439 0.0014518308 0.0028236736 0.0004915083 -0.0054981617 0.0005265680 0.0044150091 0.0010719501 -0.0014123414 -0.0017071901 -0.0011638393 0.0005245694 0.0026417643 -0.0018649211 -0.0025447819 -0.0030610445 0.0000878326 -0.0001764446 -0.0002686555 0.0000407340 -0.0000919069 -0.0000198146 -0.0001062557 -0.0000740788 0.0000713460 0.0000682617 -0.0000290085 -0.0000751258 0.0000500760 0.0000791264 -0.0000242112 0.0000417858 -0.0000518389 -0.0000170174 -0.0003420552 0.0000846172 0.0000220552 -0.0001214963 0.0011249549 0.0007801384 0.0003898795 -0.0002241631 -0.0001886675 -0.0005013764 -0.0001501489 0.0001453897 -0.0000554665 0.0003286752 0.0000590248 -0.0655673168 0.0014548076 0.0031352566 0.9938972700 0.0541385285 -0.0552211435 0.0001177452 0.0002285303 0.0000278313 -0.0002151924 -0.0008581026 -0.0015599122 0.0004989293 0.0023414435 0.0013649975 -0.0012561151 -0.0008893156 -0.0001710055 0.0005308405 0.0000634552 -0.0000251634 -0.0001678015 -0.0008887521 -0.0004199134 -0.0002059073 0.0007651210 0.0007264327 -0.0002574006 -0.0000064713 -0.0000109781 0.0003952332 -0.0003700286 -0.0004914393 -0.0000995215 0.0001263428 0.0000753099 -0.0005988265 0.0087183126 0.0073265484 -0.0012485330 -0.0005183750 -0.0010660954 0.0018497872 0.0030625182 -0.0024692046 0.0001953587 0.0006608417 0.0005357442 0.0005677656 -0.0021294796 -0.0012904759 0.0009104803 -0.0078069696 -0.0065207270 0.0005592884 0.0000803942 0.0003395445 0.0007322122 0.0000849208 -0.0003169937 0.0002470545 0.0000803487 -0.0002417141 0.0005892772 0.0011595503 -0.0014545981 -0.0014576100 -0.0002645899 0.0004799012 0.0022971838 -0.0002769103 0.0019758910 0.0000216367 0.0000108129 0.0001962249 0.0003100330 -0.0009397788 -0.0013154877 0.0003201945 0.0000745326 0.0003151462 -0.0003681687 0.0000872002 -0.0000252704 0.0000598687 0.0000400159 0.0000856636 -0.0000094336 0.0000060189 0.0000463954 -0.0050666187 0.0005910159 0.0114510811 -0.0001548309 0.0011940221 -0.0019248117 0.0007968930 0.0000280623 0.0002564477 -0.0000606231 0.0004664305 0.0002964788 -0.0003583973 -0.0000338070 -0.0002989751 -0.0001596276 -0.0001166966 -0.0000634755 0.0000560979 0.0000840197 0.0001656902 -0.0002456688 -0.0001521702 -0.0000753873 0.0001410159 0.0000501523 -0.0000342019 -0.0001595367 -0.0001023687 -0.0000563415 0.0003569165 0.0002484062 0.0000794763 0.0003389990 -0.0002307821 0.0000737278 0.0007413064 0.0002607307 0.0003137124 0.0008047654 -0.0001009756 0.0004854981 0.0009780652 0.0013063071 -0.0005873730 -0.0002138429 0.0000235770 0.0000060982 -0.0004068453 -0.0001247633 -0.0001828701 -0.0002047254 -0.0000887810 -0.0002836096 -0.0003695712 0.0000067052 0.0000087973 0.0000796099 0.0000543025 -0.0000376456 -0.0001770701 -0.0001155550 0.0000742570 -0.0000452136 0.0000398936 -0.0000061122 0.0001066358 0.0000275201 -0.0000266338 -0.0000457978 -0.0008224463 0.0003162445 -0.0003354442 -0.0001702351 0.0001061756 0.0000655664 0.0000287816 -0.0000156337 0.0000547198 -0.0000427104 0.0000133563 -0.0002315142 0.0002404554 -0.0001344270 -0.0004596845 0.0004015383 -0.0000581423 -0.0000954902 0.0000525270 -0.0001806917 0.0000459954 -0.0000343786 0.0000854144 0.0000440169 0.0000052424 0.0000789916 0.0000292748 0.0000484118 0.0000106101 -0.0002533954 -0.0002163332 -0.0002938957 -0.0003100019 -0.0004331158 -0.0002259518 -0.0000308903 -0.0000620185 0.0000028335 0.0000454967 -0.0000148410 0.0000936033 0.0002052561 0.0007294700 -0.0003602113 -0.0001472046 0.0000800785 -0.0003187497 -0.0000487203 0.0002355863 -0.0001040819 0.0004426039 -0.0007389518 -0.0004347011 -0.0007352445 0.0003034750 0.0002900770 0.0007617866 -0.0016702610 0.0021988418 -0.0002401608 0.0004450794 -0.0006581607 0.0040002702 -0.0012321949 0.0035547503 0.0009279960 -0.0034112579 0.0035794465 -0.0003337369 -0.0001819427 0.0015508204 -0.0000031264 -0.0000046466 0.0000014837 0.0000033089 0.0000146788 -0.0000057070 0.0000017496 -0.0000000572 0.0000001998 -0.0000057359 0.0000000295 0.0000007265 0.0000255457 0.0000073923 -0.0000071283 0.0000158623 -0.0000070358 0.0000285620 -0.0000041589 -0.0000015275 -0.0000045224 0.0000033086 0.0000099670 -0.0000034270 0.0000004065 0.0000025367 -0.0000041004 -0.0000307713 -0.0000944924 0.0000562297 -0.0000323705 0.0000128656 -0.0000103260 -0.0000333648 -0.0000178283 0.0000001972 0.0000554348 0.0000175418 -0.0000268395 -0.0000590643 -0.0000372072 0.0000153293 -0.0000168559 -0.0000134041 0.0000249524 -0.0007571247 -0.0014528290 -0.0000164895 0.0000612584 -0.0000641669 0.0000008503 0.0000272932 0.0000493743 -0.0000035697 0.0000617201 -0.0001002828 -0.0000660816 -0.0000040391 -0.0000458332 -0.0000133660 -0.0000660968 0.0000457858 0.0000460770 0.0004957109 0.0000713677 -0.0003309696 -0.0000277197 0.0000318932 0.0000475996 0.0001341564 0.0000417856 -0.0000710109 0.0000440060 0.0000753347 0.0000482292 -0.0048166881 -0.0010231539 0.0022876536 -0.0001721053 0.0001365749 0.0002843932 -0.0003232178 -0.0001367190 -0.0008547725 0.0044719673 0.0040721586 0.0019288878 0.0000511904 -0.0000028246 0.0000647789 -0.0000218217 -0.0000281758 -0.0000008745 0.0001167280 0.0002482660 -0.0000333744 0.0000154348 0.0000420008 0.0000035477 0.0000323564 -0.0000130703 -0.0000204255 0.0000289425 0.0000127101 -0.0000024966 -0.0018178890 -0.0024200911 -0.0002560337 -0.0001521751 0.0000735719 0.0001497187 0.0000398117 0.0000497991 -0.0000280994 -0.0002122865 -0.0000393687 0.0000857912 0.0000043663 0.0000007522 -0.0000213331 -0.0001070475 -0.0000116859 0.0000001242 0.0016586251 0.0001427031 -0.0001276163 0.0000094086 -0.0000029939 -0.0000091313 0.0008760581 0.0001298151 -0.0003464483 -0.0005102935 0.0009202385 0.0007484664 -0.0002212047 -0.0002974181 -0.0001008936 0.0000389399 0.0001335547 0.0000370304 0.0039044669 -0.0036087105 0.0019400911 -0.0000400876 -0.0000206296 -0.0001331997 -0.0001609987 -0.0007471666 -0.0008088173 0.0004114934 -0.0000217368 -0.0001268449 -0.0000565976 -0.0000880799 -0.0001441262 -0.0078159979 0.0313332758 0.0452238139 -0.0617640277 -0.0269546576 -0.0197407962 0.0239952857 0.0364423993 -0.0484379161 0.0006967014 -0.0009524384 0.0001346067 -0.0008643904 -0.0003235397 0.0001339825 0.0004355303 0.0010318906 0.0011878914 -0.0076197011 0.0078918000 -0.0022171473 0.0116386489 0.0055268491 0.0005455077 -0.0024133623 -0.0050721068 0.0106926261 0.0003190388 0.0014412004 -0.0013178552 -0.0015655212 -0.0000961662 0.0006370710 0.0024163486 -0.0000774424 0.0026460746 0.0000045614 -0.0000009455 0.0000005299 -0.0000045512 0.0000012556 0.0000005656 0.0000007675 -0.0000032411 -0.0000015189 -0.0000037198 0.0000031566 -0.0000000491 -0.0000004458 0.0000021662 0.0000033608 -0.0000038086 -0.0000004190 -0.0000015330 0.0000177730 -0.0000036493 -0.0000268492 0.0000147992 0.0000289442 -0.0000150223 0.0000138903 0.0000059643 0.0000039756 0.0000159913 -0.0000058659 -0.0000211365 0.0000315206 0.0000160962 0.0000243223 0.0000148602 0.0000210277 0.0000362039 -0.0000950936 -0.0000142951 0.0000668452 0.0000158676 0.0000053555 -0.0000086622 -0.0000106714 -0.0000046827 -0.0000032871 0.0000092925 0.0000083095 0.0000020604 -0.0000202045 -0.0001802279 -0.0002832117 0.0006213667 0.0001809131 -0.0006463622 -0.0000942940 -0.0000009499 0.0000694531 0.0000219792 -0.0000169070 0.0000897759 -0.0000121490 -0.0000234137 0.0000284799 -0.0000034321 -0.0000033935 0.0000001104 -0.0000085513 -0.0000059004 -0.0000020735 0.0000172217 -0.0000075974 -0.0000399061 0.0000615557 0.0000081996 -0.0000376021 -0.0000012876 -0.0000008231 0.0000002427 0.0000017020 0.0000019494 -0.0000014244 0.0000009187 -0.0000012074 0.0000002918 -0.0000040968 -0.0000007716 0.0000008895 0.0000034021 0.0000272448 -0.0000120132 0.0000251478 0.0000133285 -0.0000099340 -0.0000006467 0.0000024081 -0.0000007035 -0.0000043808 0.0000023898 -0.0000003703 0.0000041418 -0.0000362737 0.0000107364 0.0000369788 -0.0000251557 0.0000015932 0.0000010114 -0.0000000114 0.0000025119 -0.0000011139 0.0000000636 -0.0000022570 -0.0000009401 0.0000017820 -0.0000018124 -0.0000009527 -0.0000012621 0.0000000032 0.0000077064 -0.0000069385 0.0000100545 0.0000087196 0.0000085509 0.0000036986 0.0000019680 0.0000068190 -0.0000030913 -0.0000025686 0.0000006177 -0.0000051670 -0.0000187170 -0.0000794593 0.0000440325 0.0000216795 -0.0000101782 0.0000412529 -0.0231166712 -0.0446221809 0.0230843154 0.0207389250 0.2824638518 0.3837239697 0.3701963269 -0.1944905736 -0.0455904594 -0.1222392575 0.4324931494 -0.6093357187 -0.0039161245 0.0017034781 -0.0010958871 0.0330718003 -0.0191208987 0.0512779071 0.0174659911 0.0241528695 -0.0178757391 -0.0055387689 -0.0256886940 -0.0196737686 -0.0000200021 -0.0000041398 0.0000039749 -0.0000195084 0.0001044292 -0.0000280411 0.0000045699 -0.0000154850 0.0000050286 -0.0000200268 -0.0000026346 0.0000044688 0.0000906428 0.0000197852 -0.0000278048 0.0000867785 -0.0000310555 0.0001606639 -0.0000203493 -0.0000057319 -0.0000241963 0.0000193944 0.0000575772 -0.0000211434 0.0000078625 0.0000198398 -0.0000129859 -0.0001866046 -0.0004851498 0.0003472328 -0.0001859849 0.0000534699 -0.0000689301 -0.0001642270 -0.0001403935 -0.0000558405 0.0003447010 0.0001579536 -0.0001240412 -0.0002332044 -0.0002902609 -0.0000029295 -0.0000988377 -0.0000773982 0.0001171890 0.0002256257 0.0003963208 -0.0000007486 -0.0000344107 0.0000289612 -0.0000060639 -0.0000110124 -0.0000303890 -0.0000009486 -0.0000436790 0.0000054779 0.0000635886 0.0000239846 0.0000147744 -0.0000010096 0.0000232446 -0.0000108284 -0.0000173392 -0.0000466623 0.0000020759 0.0000498894 0.0000134719 0.0000249094 -0.0000206763 -0.0002936005 -0.0001035314 0.0000063356 -0.0000124662 -0.0000081835 -0.0000254616 0.0005030990 0.0001188064 -0.0002010083 0.0000643860 -0.0000407299 -0.0000945176 0.0000253300 -0.0000140261 0.0002218914 -0.0007144446 -0.0005398614 -0.0003409180 -0.0000094412 -0.0000001433 -0.0000174905 0.0000032198 0.0000039077 -0.0000011671 -0.0000112734 -0.0000266535 0.0000044543 -0.0000023176 -0.0000044686 0.0000010163 -0.0000091653 -0.0000085185 0.0000017227 -0.0000027513 -0.0000014149 0.0000004579 0.0002040236 0.0002646525 0.0000337028 -0.0000238322 -0.0000252940 0.0000023562 0.0000340498 0.0000894475 0.0000276926 0.0000398174 0.0000059738 0.0000003728 0.0000093171 -0.0000071892 0.0000154228 0.0005661503 0.0000170212 -0.0000131696 -0.0088210130 -0.0001873103 -0.0000009201 0.0000337200 -0.0000102646 -0.0000328608 -0.0000172891 0.0000318536 -0.0000535803 0.0001200447 -0.0001059532 -0.0000461218 -0.0000156351 0.0000271765 -0.0000709110 -0.0004672461 0.0008571124 0.0002175459 0.0355748621 -0.0306776718 0.0184403144 -0.0000663003 -0.0003920741 0.0000920539 -0.0009398650 -0.0053980233 -0.0058583013 -0.0000586092 0.0000030112 0.0000092345 -0.0000141986 -0.0000106073 -0.0000002359 -0.0671801496 0.2693014187 0.3882049054 -0.5537199194 -0.2419976411 -0.1761774824 0.2116289891 0.3222935186 -0.4275182788 -0.0022275415 0.0025047078 0.0002550478 0.0047214830 0.0014248369 -0.0003131759 -0.0009821001 -0.0011310397 -0.0020132645 -0.0564873896 0.0579670223 -0.0166514983 0.0850061646 0.0407369968 0.0044857300 -0.0177306269 -0.0373633849 0.0781418926 0.0000169159 0.0001304601 -0.0000748287 0.0000564214 0.0000134802 -0.0000289126 0.0001474623 -0.0000337378 0.0001429572 -0.0000057070 0.0000065061 -0.0000027974 -0.0000132341 0.0000463597 0.0000545604 -0.0000040134 -0.0000039490 -0.0000055953 0.0000111500 -0.0000043846 0.0000013298 -0.0000023422 -0.0000001374 -0.0000008511 -0.0000015976 -0.0000060983 -0.0000102565 0.0001699779 -0.0002778484 -0.0005350611 -0.0000111685 0.0000236097 0.0000353890 -0.0000269830 0.0000114835 0.0000115974 0.0000163356 -0.0000448268 -0.0000203105 0.0000591310 0.0000220262 0.0001043394 0.0000385233 0.0000687548 0.0002842084 -0.0000544205 -0.0000020937 -0.0000394331 0.0000035009 0.0000058768 0.0000087119 -0.0000057847 -0.0000029604 -0.0000052153 0.0000073736 0.0000095914 -0.0000106823 -0.0001887541 -0.0009094875 -0.0020830088 0.0000840725 0.0000101650 0.0000692579 -0.0000480515 -0.0000191200 -0.0000113548 -0.0000172615 0.0000139301 0.0000378110 -0.0000097784 -0.0000743575 0.0000262503 0.0000111343 -0.0000059923 -0.0000109410 0.0000087788 -0.0000003052 -0.0000016431 0.0000114417 0.0000086419 0.0000117683 0.0000224380 0.0000058783 -0.0000016729 -0.0000023682 -0.0000026205 0.0000015810 0.0000078126 0.0000059991 -0.0000025714 0.0000013193 -0.0000072390 0.0000023492 -0.0000066764 -0.0000025225 0.0000016779 0.0000044655 0.0000941971 -0.0000321802 0.0000381389 0.0000179021 -0.0000101556 -0.0000037159 0.0000000316 -0.0000001116 -0.0000047273 0.0000036558 -0.0000013677 0.0000169150 -0.0000243462 0.0000087051 0.0000469684 -0.0000352324 0.0000044192 -0.0000030132 -0.0000059843 0.0000081417 -0.0000112073 -0.0000085500 -0.0000143244 -0.0000027280 0.0000011945 -0.0000025084 -0.0000075185 -0.0000096344 -0.0000045284 0.0000213338 0.0000538647 -0.0000098373 0.0000489023 0.0000683901 0.0000383465 0.0000104072 0.0000263236 -0.0000135276 -0.0000088747 -0.0000024266 -0.0000191146 -0.0001006883 -0.0003026945 0.0001793948 0.0000442420 -0.0000293520 0.0001218498 0.0027855850 0.0052724486 -0.0027786983 -0.0025061938 -0.0333520071 -0.0452785583 -0.0440034987 0.0231359830 0.0054491734 0.0144251678 -0.0514786521 0.0724921349 -0.0038111582 0.0006111637 -0.0006161820 0.0263374663 -0.0151644159 0.0404528366 0.0183957440 0.0250204296 -0.0205596816 -0.0037110421 -0.0179081430 -0.0143701267 0.0000052856 0.0000017680 -0.0000005051 0.0000045600 -0.0000270025 0.0000087976 -0.0000013700 0.0000034305 -0.0000013663 0.0000054016 0.0000005010 -0.0000006804 -0.0000225988 -0.0000079262 0.0000062256 -0.0000172816 0.0000058645 -0.0000304567 0.0000039947 0.0000011430 0.0000046001 -0.0000033946 -0.0000096881 0.0000018181 -0.0000010265 -0.0000039731 0.0000037437 0.0000279105 0.0000846012 -0.0000585177 0.0000377016 -0.0000104435 0.0000132648 0.0000399592 0.0000281977 0.0000066831 -0.0000685265 -0.0000288252 0.0000267051 0.0000471509 0.0000478568 -0.0000106580 0.0000196846 0.0000151141 -0.0000248432 -0.0000472701 -0.0001113656 0.0000483307 -0.0000000395 0.0000034144 0.0000081415 0.0000019297 0.0000035395 -0.0000005567 0.0000040904 0.0000016978 -0.0000068625 -0.0000043385 -0.0000031005 0.0000002891 -0.0000029759 0.0000003823 0.0000016838 -0.0000036693 -0.0000019243 -0.0000015904 0.0000014296 0.0000012874 0.0000026646 0.0000499100 0.0000186805 0.0000036376 0.0000039870 0.0000012725 0.0000044938 0.0000318406 0.0000066255 -0.0000180138 -0.0000042548 0.0000103030 0.0000071644 0.0000047725 0.0000020470 -0.0000185118 0.0000285951 0.0000106618 0.0000154831 0.0000019033 0.0000016223 0.0000028594 0.0000015049 0.0000039932 -0.0000033635 -0.0000041504 -0.0000046330 0.0000001285 -0.0000064276 0.0000006666 -0.0000000534 -0.0000104010 -0.0000113696 -0.0000015647 -0.0000068230 -0.0000021533 0.0000037851 0.0000246978 0.0000376461 -0.0000070557 0.0000654217 -0.0000246261 -0.0000202635 0.0000605504 0.0000932241 0.0000117263 0.0000590935 0.0000003112 -0.0000359965 0.0000048755 -0.0000020344 -0.0000034366 -0.0000934789 -0.0000073040 -0.0000020408 0.0014191682 0.0000337299 0.0000405643 -0.0000078265 0.0000010118 0.0000056270 -0.0000364525 -0.0000129138 0.0000278579 0.0001307249 0.0000272716 -0.0000881502 -0.0002125336 -0.0000923355 0.0000233086 0.0001096912 0.0006723378 0.0008181151 -0.0054895409 0.0049588125 -0.0027462821 0.0002287576 0.0004628767 -0.0006124892 -0.0023529461 -0.0359356926 -0.0366605893 -0.0000344674 0.0000301848 0.0000457630 0.0001314043 0.0001189372 -0.0000019175 0.0118737959 -0.0455114560 -0.0637303382 0.0848628793 0.0374228788 0.0269616345 -0.0331237795 -0.0506382803 0.0671453838 0.0054879000 -0.0078297908 0.0006326067 -0.0100740557 -0.0028380811 0.0011756314 0.0015555248 0.0042671212 0.0034825149 -0.3814971420 0.3937352469 -0.1114770879 0.5251113068 0.2518707815 0.0277712331 -0.1144520466 -0.2354076050 0.5015954597 -0.0004238937 -0.0015259546 0.0012005188 0.0007181648 0.0000447136 -0.0000725735 -0.0018560517 -0.0002674085 -0.0014178701 -0.0000000725 -0.0000019453 -0.0000052959 0.0000043802 -0.0000067786 -0.0000103173 0.0000045118 0.0000061085 0.0000048738 -0.0000025748 0.0000002832 -0.0000075776 0.0000011060 0.0000034379 0.0000006882 -0.0000010290 0.0000031192 0.0000011843 -0.0000394986 0.0000633415 0.0001219746 -0.0000303454 -0.0000247007 -0.0000164989 0.0000019218 -0.0000073334 -0.0000144296 0.0000430029 0.0000068248 -0.0001021579 0.0000292672 0.0000005615 0.0000252602 -0.0000063105 -0.0000151437 -0.0000542299 0.0000133831 0.0000007662 0.0000035905 -0.0000018404 -0.0000011016 -0.0000008639 0.0000017873 0.0000006838 0.0000009222 -0.0000009072 -0.0000016051 0.0000013982 0.0000272438 0.0002112569 0.0004339135 -0.0000358913 -0.0000012915 0.0000120229 0.0000120973 0.0000056618 0.0000024408 0.0000017727 -0.0000013607 -0.0000153925 -0.0000049613 0.0000119148 -0.0000037324 -0.0000007701 0.0000038279 0.0000052236 0.0000023420 0.0000036220 0.0000036768 -0.0000030215 -0.0000027007 -0.0000026255 -0.0000056989 -0.0000021823 0.0000006414 0.0000006208 0.0000009124 -0.0000004887 -0.0000025527 -0.0000013549 0.0000007314 -0.0000004842 0.0000024187 -0.0000008572 0.0000025046 0.0000009297 -0.0000006805 -0.0000019825 -0.0000316930 0.0000119483 -0.0000166952 -0.0000076021 0.0000048022 0.0000011047 0.0000009879 -0.0000003528 0.0000015833 -0.0000012797 0.0000003687 -0.0000043229 -0.0000044050 -0.0000001214 -0.0000159797 0.0000115603 -0.0000015856 0.0000001822 0.0000010650 -0.0000020637 0.0000013495 0.0000010634 0.0000023645 0.0000006912 -0.0000002249 0.0000004507 0.0000025009 0.0000028379 0.0000017121 -0.0000078740 -0.0000082002 0.0000025326 -0.0000173570 -0.0000216306 -0.0000150060 -0.0000024183 -0.0000059398 0.0000025937 0.0000031733 0.0000003251 0.0000063318 0.0000190725 0.0000658828 -0.0000408463 -0.0000201261 0.0000100198 -0.0000488348 0.0000429513 0.0001231130 -0.0000464999 -0.0000624597 -0.0007922216 -0.0010627749 -0.0007942443 0.0004092174 0.0000795471 0.0003196501 -0.0010781299 0.0015029639 0.0007947614 -0.0001850343 0.0001456812 -0.0057486352 0.0033410815 -0.0088346170 -0.0037340860 -0.0050310833 0.0041418960 0.0008131024 0.0040935155 0.0032551624 0.0000072202 0.0000080943 -0.0000016573 -0.0000036067 0.0000038320 -0.0000073458 -0.0000036059 -0.0000035780 0.0000009330 0.0000079024 0.0000026980 -0.0000042453 -0.0000390548 -0.0000124526 0.0000089956 -0.0000467051 0.0000240440 -0.0000885560 0.0000102861 0.0000057281 0.0000156136 -0.0000137398 -0.0000299749 0.0000188761 0.0000029263 0.0000060408 0.0000111051 0.0001073521 0.0002356039 -0.0001088412 0.0001047320 -0.0000433207 0.0000197009 0.0000847559 0.0000429080 0.0000051572 -0.0001550157 -0.0000578926 0.0000811116 0.0000605264 -0.0000259503 -0.0000079311 0.0000377485 0.0000209769 -0.0000432064 0.0009397164 0.0006396414 0.0004813093 -0.0002256757 0.0003216620 0.0002188091 -0.0000456562 -0.0000715990 -0.0000171652 -0.0000213065 0.0000459261 0.0003519627 -0.0000030517 0.0000522850 0.0000102434 0.0000756395 -0.0000385003 -0.0000544568 -0.0000122803 -0.0000474217 0.0002367556 0.0001509229 0.0000494839 0.0000242777 -0.0000063023 0.0000386065 0.0000064967 -0.0000589099 -0.0000472441 -0.0000032342 0.0006034256 0.0001224960 -0.0001326009 0.0000913285 -0.0001394616 -0.0002724112 0.0001046866 -0.0002943971 0.0006037611 -0.0000325295 0.0007641668 -0.0004025047 -0.0000601682 0.0000492611 -0.0000249207 -0.0000037841 0.0000096911 0.0000034607 0.0000235299 -0.0000185257 -0.0000004939 -0.0000634656 -0.0000303473 0.0000179415 -0.0000035577 0.0000060572 0.0000052070 -0.0000047422 0.0000076914 0.0000036156 0.0000752505 0.0000867873 0.0000005942 0.0005780509 -0.0000621852 -0.0002794082 -0.0000575620 -0.0000744707 0.0000217698 0.0000308783 0.0000140188 0.0000122201 0.0000663408 -0.0001518802 -0.0000533516 0.0000859704 -0.0000134241 -0.0000528670 -0.0017083271 -0.0002493025 0.0003165399 0.0000708434 0.0000183964 -0.0000917908 0.0009021863 0.0008883282 -0.0001462400 -0.0003804224 -0.0016512550 -0.0006464495 0.0006507580 0.0004704420 -0.0000126499 -0.0001048933 0.0000211859 0.0000233821 -0.0041899098 0.0004890196 -0.0032664603 0.0000433959 0.0008994753 -0.0032845872 0.0001815048 -0.0001388875 0.0000187037 -0.0002701250 0.0002787634 0.0002536628 0.0002308000 0.0005587486 0.0004427785 0.0013791659 -0.0095202346 -0.0138676947 0.0581880889 0.0245055387 0.0176499668 -0.0161368607 -0.0245307119 0.0320092476 0.0213663189 -0.0304689594 0.0029009951 -0.0313888128 -0.0088563674 0.0029734121 0.0093245149 0.0263370915 0.0331533592 -0.0014838438 0.0013585609 -0.0005648272 0.0000081239 0.0000700792 0.0000278781 -0.0001580692 -0.0001143083 0.0005127303 -0.0015417872 -0.0075631821 0.0064922685 0.0072713748 -0.0000712772 -0.0028194339 -0.0088390508 0.0001653699 -0.0093598628 -0.0000061254 0.0000014371 -0.0000134645 0.0000077071 -0.0000000439 -0.0000073464 0.0000058585 0.0000116829 0.0000018801 0.0000123780 0.0000038610 -0.0000092887 -0.0000004768 0.0000031419 -0.0000134436 0.0000080687 0.0000075633 0.0000073373 -0.0000360050 0.0000309668 0.0000746588 -0.0000254630 -0.0000487184 0.0000102740 -0.0000091123 -0.0000071307 -0.0000213091 -0.0000201904 0.0000268800 0.0000540465 -0.0000593524 -0.0000177514 -0.0000578786 -0.0000571870 0.0000251867 0.0000062560 -0.0002748278 0.0000696681 0.0002521475 0.0000227091 0.0000200933 -0.0001044153 -0.0000816595 -0.0000388144 0.0000427988 0.0000255560 0.0000398165 0.0000865373 0.0002439102 0.0000564540 0.0006478329 0.0024388366 0.0005100891 -0.0020787032 -0.0002053978 -0.0000170053 0.0000216474 -0.0001135224 -0.0000496037 0.0000197322 0.0000698653 0.0000758745 -0.0000237317 0.0000003625 0.0000054701 0.0000062425 0.0000104183 0.0000071146 0.0000060625 0.0000390676 0.0000153041 0.0000142672 0.0000968169 0.0000468508 0.0000063346 0.0000020811 0.0000001450 -0.0000002861 0.0000017543 -0.0000053713 0.0000025622 -0.0000014765 -0.0000038269 0.0000015895 0.0000008332 -0.0000013361 0.0000000779 -0.0000012127 0.0000150380 -0.0000111194 0.0000129324 -0.0000027963 -0.0000066894 -0.0000018899 -0.0000063391 0.0000029417 0.0000055421 -0.0000019029 -0.0000000489 0.0000142028 0.0000905300 -0.0000443063 -0.0000343333 0.0000226315 -0.0000063212 -0.0000054043 -0.0000008425 -0.0000070443 0.0000042543 -0.0000013844 0.0000040092 0.0000020670 -0.0000028629 0.0000064174 -0.0000042965 -0.0000025719 -0.0000047251 0.0000003700 0.0000450015 -0.0000533183 0.0000260099 0.0000243468 0.0000135151 -0.0000020518 -0.0000082910 0.0000054592 -0.0000026030 -0.0000010887 -0.0000016644 0.0000318072 0.0000688274 -0.0000328002 0.0000218693 -0.0000134816 0.0000348316 0.0020877126 0.0030310208 -0.0020233394 -0.0018728128 -0.0188897340 -0.0249130840 -0.0290820107 0.0146001836 0.0038741930 0.0076275498 -0.0321891036 0.0444746937 -0.0517155481 0.0206413452 -0.0137589746 0.4239413514 -0.2349237414 0.6270856472 0.2414879966 0.2996118000 -0.2313256311 -0.0562644731 -0.3037939983 -0.2348370295 0.0000143166 0.0000079934 -0.0000131711 0.0000437949 -0.0002549563 0.0000905821 -0.0000103479 0.0000327704 -0.0000080896 0.0000302691 -0.0000021908 -0.0000082353 -0.0001893981 -0.0000064582 0.0000545242 -0.0000183109 0.0000101796 -0.0000308654 0.0000032262 0.0000058971 0.0000039310 -0.0000033814 -0.0000093263 0.0000043923 -0.0000001263 0.0000008670 0.0000048913 0.0000242164 0.0000745737 -0.0000395930 0.0000233113 -0.0000347297 -0.0000033532 -0.0001473685 0.0000157970 -0.0000082439 -0.0000354911 0.0000554621 0.0000516272 0.0000078604 0.0000722662 0.0000564250 0.0000152802 0.0000084361 -0.0000572122 0.0007282600 -0.0033323520 -0.0000860248 -0.0002240869 0.0002828372 0.0002237821 0.0000402704 0.0000007053 -0.0000238441 -0.0000153075 -0.0000514572 0.0000096523 -0.0000163320 -0.0000931229 -0.0000152236 -0.0000112316 -0.0000058612 0.0000061132 -0.0000441789 0.0000021162 0.0000456227 0.0001519781 0.0003715101 0.0000500863 0.0001438138 0.0000983260 -0.0000529147 -0.0001047479 -0.0001926774 -0.0000136929 0.0004464259 0.0000294408 -0.0002698872 0.0000342347 0.0002511174 0.0001127873 0.0001057586 -0.0000847284 -0.0001300235 -0.0000756605 0.0001207733 0.0001807693 -0.0000154058 -0.0000383516 0.0000130819 -0.0000089315 -0.0000379679 -0.0000178876 0.0000259215 0.0000499732 -0.0000208631 0.0007010222 0.0000467092 -0.0001435368 -0.0000655685 -0.0000751048 0.0000134002 0.0000148225 0.0000164321 -0.0000036937 -0.0001447536 -0.0004193957 -0.0000126962 -0.0063128217 0.0003750387 0.0029862796 0.0009054424 0.0015515694 -0.0001661006 0.0000356697 0.0000025439 0.0000047312 -0.0000515738 0.0002497751 0.0000707022 0.0002360051 -0.0001311747 -0.0001017478 -0.0053725060 -0.0004147073 0.0009025712 0.0000070958 0.0000017337 -0.0000065082 0.0000658303 0.0000840438 0.0001036956 -0.0000696935 -0.0002909023 -0.0001081910 0.0000682267 0.0001156524 -0.0000488164 0.0002505257 0.0002366219 -0.0008609665 -0.0004711218 0.0004634464 -0.0002118523 -0.0042640897 -0.0261977046 0.0433386336 0.0000241655 -0.0000569856 -0.0009680469 -0.0000533486 0.0000712591 0.0000561535 0.0001827286 0.0005200161 0.0003208609 0.0007543456 -0.0032522294 -0.0049148859 0.0064841449 0.0028274867 0.0018886889 -0.0027357892 -0.0052563301 0.0066773607 -0.3579178036 0.5118420408 -0.0440417773 0.5240147419 0.1459524396 -0.0525245813 -0.1173371183 -0.3510740849 -0.4057029830 -0.0032695099 0.0036494706 -0.0006309067 0.0052231607 0.0024204071 0.0001798975 -0.0028723374 -0.0050809280 0.0121392808 -0.0012672597 -0.0064480648 0.0052760324 0.0055243046 -0.0001486312 -0.0022087044 -0.0065241627 0.0000088139 -0.0069969448 -0.0000303182 -0.0000239230 0.0001786675 0.0000102462 -0.0000877034 0.0000498475 -0.0000988719 -0.0001024991 0.0000106870 -0.0001261111 -0.0001437921 0.0001272949 0.0000184589 -0.0000778637 0.0001927791 -0.0000183819 -0.0000997818 -0.0000378683 -0.0000618160 -0.0001117151 -0.0000682118 0.0001373669 0.0000784309 -0.0000709928 -0.0000841614 0.0000305312 0.0002452350 0.0001451305 -0.0002337587 -0.0006802908 0.0000217952 0.0000098341 -0.0000001474 -0.0000066258 0.0000012508 -0.0000008636 -0.0000206571 0.0000050213 0.0000220377 0.0000003916 0.0000008717 -0.0000099946 -0.0000057227 -0.0000021876 0.0000079439 -0.0000016650 0.0000018438 0.0000098055 0.0000227056 0.0000117739 0.0000439652 0.0002068494 0.0000451112 -0.0001809920 -0.0000097436 0.0000004234 -0.0000037706 -0.0000201574 -0.0000045933 -0.0000403524 0.0000362028 0.0000261878 -0.0000270039 0.0000470138 -0.0000405017 -0.0000828691 -0.0000267657 -0.0000303076 -0.0000459432 0.0000021825 0.0000002558 0.0000043763 0.0000038487 0.0000015392 0.0000029636 0.0000080960 0.0000008512 -0.0000012021 -0.0000058393 -0.0000055962 0.0000043414 -0.0000031831 0.0000078600 -0.0000032556 0.0000063663 0.0000011386 -0.0000009700 0.0000016098 -0.0001118012 0.0000456011 -0.0000183308 -0.0000115178 0.0000098521 0.0000018011 0.0000006445 -0.0000005482 0.0000066901 -0.0000036344 0.0000005949 -0.0000041034 0.0000199167 -0.0000119525 -0.0000647011 0.0000468364 -0.0000009285 -0.0000026793 -0.0000012766 -0.0000046921 0.0000003053 -0.0000003859 0.0000015968 0.0000011091 -0.0000011633 0.0000028017 0.0000032410 0.0000047297 0.0000018371 -0.0000128174 0.0000117844 -0.0000201058 -0.0000366202 -0.0000453764 -0.0000233982 -0.0000021569 -0.0000072262 0.0000034827 0.0000034165 -0.0000012756 0.0000074528 0.0000164675 0.0000788215 -0.0000403574 -0.0000312457 0.0000112566 -0.0000553462 0.0000152206 0.0001085226 -0.0000730706 -0.0000553768 -0.0004493816 -0.0005923525 -0.0004747846 0.0001367568 0.0000653172 0.0001996816 -0.0009365680 0.0012943288 -0.0028516255 0.0025627845 -0.0022161756 0.0321551521 -0.0176911120 0.0475579014 0.0061267583 0.0083937581 -0.0062949878 -0.0036717049 -0.0196264595 -0.0154545903 -0.0000012141 -0.0000014098 0.0000002980 0.0000024769 0.0000373448 -0.0000073972 0.0000000651 -0.0000036497 0.0000009763 -0.0000028300 0.0000007364 -0.0000007348 0.0000109773 0.0000023972 -0.0000025617 0.0000071942 -0.0000020583 0.0000103497 -0.0000019130 -0.0000016210 -0.0000012762 -0.0000012350 -0.0000019009 0.0000027688 0.0000022882 0.0000031544 -0.0000021645 0.0000078657 0.0000136715 0.0000039662 -0.0000118749 -0.0000014042 -0.0000034506 -0.0000108305 -0.0000112363 -0.0000015590 0.0000209350 0.0000155641 -0.0000123525 -0.0000289643 -0.0000148015 0.0000022518 -0.0000089283 -0.0000133909 0.0000106437 -0.0008676142 -0.0012807500 0.0001358636 0.0000737156 -0.0001142326 -0.0000833045 0.0000162402 0.0000493781 0.0000061953 0.0000455564 -0.0000221849 -0.0000523148 -0.0000152686 -0.0000362080 -0.0000022601 -0.0000269270 0.0000288241 0.0000285549 -0.0000033850 -0.0000290467 -0.0000091592 -0.0000034557 0.0000374719 0.0000197655 0.0002339515 0.0000774260 -0.0000943148 -0.0000956779 -0.0001911857 -0.0000056502 0.0000152864 -0.0000479825 -0.0000959446 -0.0000956048 0.0000875210 0.0001683104 -0.0000305130 0.0000377044 -0.0003897042 0.0012585143 0.0009086449 0.0004540657 0.0000524996 0.0000572674 0.0000418731 -0.0000295021 -0.0001081833 -0.0000979231 -0.0001546049 -0.0000579035 -0.0000009456 -0.0000402551 -0.0000169672 -0.0000455251 0.0000148245 -0.0000041202 -0.0000825455 0.0001323936 -0.0000368973 -0.0002101500 0.0007269237 0.0014807845 -0.0000574380 0.0005464575 0.0001040527 -0.0001260363 0.0002369364 0.0002775284 0.0000286662 -0.0021005164 -0.0000221075 0.0011738428 -0.0005523096 0.0012462465 0.0006956831 -0.0002447761 -0.0000371660 0.0000085138 0.0036924349 0.0002870502 -0.0001368542 0.0000045895 0.0000044768 0.0000032615 -0.0001975517 0.0001839871 0.0005693991 0.0027489469 -0.0003041274 -0.0013448537 -0.0005022458 -0.0006513164 -0.0002357330 -0.0000097065 0.0000606586 0.0000919073 0.0001006144 -0.0000661381 0.0001386342 0.0000346302 0.0003551150 -0.0005647143 0.0005616833 0.0001580834 0.0000045749 -0.0011479960 0.0014435867 0.0012857180 0.0115861210 0.0385168170 0.0246642411 0.0001490908 0.0000007035 0.0002225390 -0.0019849848 -0.0007551209 -0.0005917014 0.0007233572 0.0012410437 -0.0015006874 0.0047446867 -0.0067228963 0.0006642792 -0.0068109564 -0.0019253699 0.0007288180 0.0015093012 0.0043434020 0.0047759085 -0.0010519080 0.0003123482 0.0000917904 -0.0050955459 -0.0028026378 -0.0003625834 -0.0000663542 0.0002675438 -0.0002557161 -0.0843235456 -0.4554067840 0.3653599118 0.4042899903 -0.0159320923 -0.1637323647 -0.4590782845 -0.0011856509 -0.4978681544 0.0000008493 0.0000024553 0.0000002421 -0.0000051023 0.0000027581 -0.0000010049 0.0000094654 0.0000001819 0.0000043202 -0.0000004490 0.0000042146 -0.0000017540 -0.0000026867 0.0000048178 -0.0000000276 -0.0000032062 -0.0000022652 -0.0000065360 0.0000191503 -0.0000171275 -0.0000162238 -0.0000319973 0.0000196981 -0.0000544334 0.0000228897 0.0000198349 0.0000297360 0.0000067722 -0.0000299239 0.0000028741 0.0000423926 0.0000246198 0.0000676223 -0.0000050383 -0.0000029012 -0.0000022287 0.0000016063 0.0000006487 0.0000038519 -0.0000078601 -0.0000050024 -0.0000014022 0.0000029090 -0.0000003794 -0.0000099299 -0.0000038096 -0.0000019662 -0.0000039072 0.0000153961 0.0000164432 0.0000441860 0.0000470217 -0.0000358284 0.0000076226 0.0000315867 -0.0000011774 -0.0000052877 0.0000363547 0.0000034147 0.0000802407 0.0000196783 0.0000051571 -0.0000027094 -0.0000014587 -0.0000101649 -0.0000143274 -0.0000182297 -0.0000117408 -0.0000123411 -0.0000070749 0.0000032724 -0.0000008173 -0.0000188853 0.0000040283 0.0000042960 -0.0000001397 -0.0000004191 0.0000003984 0.0000011815 0.0000002117 0.0000000379 0.0000000337 -0.0000033348 0.0000010977 -0.0000026214 -0.0000010374 0.0000007193 0.0000030853 0.0000388380 -0.0000100916 0.0000224174 0.0000100466 -0.0000025815 -0.0000005888 -0.0000038206 0.0000009927 -0.0000011417 0.0000010885 -0.0000003292 0.0000013970 0.0000412278 -0.0000055139 0.0000138630 -0.0000083926 0.0000044981 0.0000001686 -0.0000004322 0.0000014592 0.0000005438 -0.0000001908 -0.0000010968 -0.0000004303 -0.0000042803 0.0000015256 -0.0000037778 -0.0000044184 -0.0000036393 0.0000060271 0.0000502262 -0.0000165657 0.0000282532 0.0000401668 0.0000279724 0.0000012724 0.0000018596 -0.0000003736 -0.0000027940 -0.0000001342 -0.0000051958 -0.0000077626 -0.0000290168 0.0000215904 0.0000156967 -0.0000097339 0.0000444589 -0.0004819635 0.0000162412 0.0001554894 -0.0002663142 0.0007082896 0.0009105968 0.0056007136 -0.0032970711 -0.0009842321 -0.0003352918 0.0016450735 -0.0023858015 0.0009182340 -0.0004597371 0.0001315870 -0.0077936079 0.0043943560 -0.0109796410 -0.0039753455 -0.0051302250 0.0040253237 0.0010308407 0.0067284879 0.0051552784 0.0000008774 -0.0000003882 -0.0000000192 0.0000028029 -0.0000168831 0.0000087098 0.0000000052 0.0000021830 -0.0000007031 0.0000005381 -0.0000001609 0.0000000601 -0.0000036045 -0.0000019233 0.0000011990 -0.0000000429 -0.0000009223 0.0000007543 -0.0000000751 0.0000001246 -0.0000000260 0.0000009982 0.0000029942 -0.0000023096 -0.0000000682 -0.0000004460 -0.0000007026 -0.0000139367 -0.0000342738 0.0000210008 0.0000024008 0.0000002615 -0.0000011046 0.0000034023 0.0000038711 -0.0000006980 -0.0000038470 -0.0000038671 0.0000049679 0.0000009367 0.0000029301 -0.0000061853 -0.0000013402 0.0000012215 -0.0000052753 0.0003150970 0.0004744673 0.0005673682 0.0000852694 -0.0002855187 -0.0002312830 -0.0000585984 0.0000006726 0.0000353991 -0.0000418990 0.0001864086 0.0000878649 -0.0000134219 0.0000508472 0.0000261694 0.0001229606 0.0000104357 -0.0000532606 -0.0011917706 -0.0002681834 0.0007898393 0.0000764419 -0.0000229405 -0.0000627509 0.0000155107 0.0000113316 0.0000147409 -0.0005956603 -0.0013172950 -0.0000432654 0.0124564417 0.0027568511 -0.0072915541 0.0000291205 -0.0001812549 -0.0002111501 0.0011689553 0.0014113639 0.0003963708 -0.0133262295 -0.0128144657 -0.0050100769 -0.0000913622 -0.0000681188 -0.0000324400 0.0000415074 -0.0000096690 -0.0000186090 -0.0002858192 -0.0005492619 0.0000485555 -0.0000196972 -0.0000480505 0.0000005146 -0.0000350416 0.0000111940 0.0000168016 0.0000210615 -0.0000126088 -0.0000277507 0.0036276387 0.0063677014 -0.0000725498 0.0005545837 0.0000247953 -0.0003027152 -0.0000301630 -0.0001314439 0.0000118023 -0.0006391226 -0.0000203702 0.0002827351 -0.0001829795 0.0003203870 0.0001722094 -0.0000835126 -0.0000111037 0.0000078586 0.0010613469 0.0000313749 0.0000276700 -0.0000033693 -0.0000008589 0.0000032489 -0.0004941320 -0.0009371077 0.0002626139 -0.0001945011 0.0002402626 0.0000915995 -0.0000152361 -0.0000727141 0.0000371417 0.0000154974 -0.0000038881 0.0000077338 0.0001596966 0.0001293679 -0.0000492122 -0.0000358880 -0.0000535504 -0.0000056416 -0.0000237492 0.0000234874 -0.0000227115 0.0000345699 -0.0002349404 -0.0002204618 0.0000181905 0.0001592520 -0.0000835447 0.0000395663 -0.0000516068 -0.0001039519 -0.0013907589 -0.0005571340 -0.0004900518 -0.0005649107 -0.0008603551 0.0011348367 -0.0002617111 0.0004047392 -0.0000419856 0.0005477375 0.0001305271 -0.0000403577 0.0000325144 0.0000467581 0.0001272184 0.0002106096 -0.0002117979 0.0000669374 0.0000992753 0.0000519792 0.0000020603 -0.0000458601 -0.0000970687 0.0001732016 -0.0003101536 -0.0020482212 0.0014671793 -0.0000373107 0.0000360131 0.0000783342 -0.0001303702 -0.0000233204 -0.0001585997 0.0000013489 -0.0000003828 0.0000011913 -0.0000009240 -0.0000024332 -0.0000035090 0.0000042800 0.0000004671 0.0000028101 -0.0000025851 0.0000008514 -0.0000001379 0.0000001239 0.0000020360 0.0000026898 -0.0000011630 0.0000000642 -0.0000009272 -0.0000063654 0.0000226795 0.0000354136 -0.0000294751 -0.0000069301 -0.0000287994 0.0000079004 0.0000011823 0.0000043518 0.0000053592 -0.0000224690 -0.0000182519 0.0000074729 0.0000008624 0.0000099787 0.0000069859 -0.0000006534 -0.0000121782 -0.0000382557 -0.0000126356 0.0000284103 0.0000032471 -0.0000000372 0.0000001464 0.0000026223 -0.0000001853 -0.0000086202 0.0000009698 -0.0000010752 -0.0000056511 -0.0000253211 0.0000291492 0.0001177108 0.0002980522 0.0001333683 -0.0002383119 0.0000009652 0.0000100062 0.0000234401 0.0000208661 0.0000152892 0.0000648426 -0.0000152682 -0.0000045969 0.0000138553 -0.0000015918 -0.0000006465 -0.0000011499 -0.0000044317 -0.0000015423 -0.0000021607 -0.0000022653 -0.0000074304 -0.0000128818 0.0000021747 0.0000011803 -0.0000126733 -0.0000000534 0.0000003146 -0.0000000963 -0.0000010986 0.0000001481 0.0000001528 0.0000001042 0.0000011837 -0.0000004469 0.0000009317 0.0000006584 -0.0000004057 0.0000008740 -0.0000132541 0.0000075635 -0.0000081643 -0.0000041818 0.0000052278 0.0000005601 -0.0000024690 0.0000004812 0.0000009510 -0.0000007493 0.0000000540 -0.0000052052 0.0000237980 -0.0000020684 -0.0000112453 0.0000062292 0.0000009929 0.0000003783 0.0000003392 0.0000001283 0.0000000539 0.0000003447 -0.0000003036 -0.0000008983 -0.0000039404 0.0000010645 0.0000002611 0.0000000800 0.0000000674 0.0000094345 0.0000379557 -0.0000104415 -0.0000034891 -0.0000050659 0.0000002203 0.0000000800 0.0000004637 -0.0000008275 0.0000004391 0.0000001496 0.0000000459 -0.0000053674 -0.0000079941 0.0000041435 -0.0000030609 -0.0000023627 -0.0000003922 0.0395042537 -0.0091116602 0.0812356655 -0.0235419627 -0.4159344873 -0.5321768220 -0.3408614241 0.1754068447 0.0582533002 -0.0935015092 0.3615800107 -0.4942402997 -0.0006600511 -0.0008249166 0.0008397588 -0.0039433958 0.0013279594 -0.0037023058 0.0078102016 0.0086163750 -0.0074184924 0.0007258459 -0.0002433421 0.0005944788 0.0000212821 0.0000122421 -0.0000038231 0.0000083312 -0.0003377136 0.0001244157 -0.0000055016 0.0000357566 -0.0000124005 0.0000277971 0.0000009628 0.0000004637 -0.0001375147 -0.0000532823 0.0000308274 -0.0000418827 0.0000174592 -0.0000657129 0.0000070399 -0.0000030923 0.0000058376 -0.0000258381 -0.0000704535 0.0000261785 0.0000123175 -0.0000000910 0.0000130167 0.0002207656 0.0007556895 -0.0004395870 0.0000932218 -0.0000400152 0.0000229052 0.0001189019 0.0000800963 -0.0000570004 -0.0001471819 -0.0000464889 0.0001209641 0.0000278358 0.0000854355 0.0000169228 0.0000265272 0.0000289731 -0.0000826329 -0.0002021913 -0.0005477479 0.0001373900 0.0000118834 -0.0000237614 0.0000070498 -0.0000092814 0.0000196021 0.0000022230 0.0000242122 0.0000242809 0.0000626072 -0.0000419448 -0.0000155057 0.0000139321 0.0000159231 0.0000111034 -0.0000018896 -0.0000431423 -0.0000493084 0.0000696305 0.0000620271 0.0000418093 0.0000139354 0.0004780167 0.0001560677 -0.0001507873 -0.0001259592 -0.0002700248 0.0000118017 0.0004291648 0.0000991462 -0.0003221513 -0.0000115247 0.0000378732 -0.0000189729 -0.0000544301 -0.0000215688 -0.0000677101 0.0006511440 0.0007219231 0.0001732787 -0.0000011467 0.0000058652 0.0000115572 0.0000007396 -0.0000093139 -0.0000021736 -0.0000077930 -0.0000215453 0.0000003272 -0.0000083782 0.0000007656 -0.0000017874 0.0000036248 0.0000015679 -0.0000027870 0.0000118821 0.0000017237 -0.0000063786 0.0000795827 0.0001767643 -0.0000067011 0.0001398746 0.0000461360 -0.0000230839 0.0000166517 -0.0000282666 -0.0000148199 -0.0001729209 -0.0000077594 0.0000661686 -0.0000165195 0.0000352545 0.0000121142 -0.0003325333 -0.0000421889 -0.0000073249 0.0050009926 0.0001349742 0.0000725674 0.0000053444 0.0000273035 0.0000239491 0.0001620751 0.0000282503 0.0000202245 -0.0000790992 0.0000425289 -0.0001042289 -0.0001821508 -0.0000677498 0.0000328794 0.0005151882 0.0002112092 -0.0000715249 0.0667340800 0.0604339018 -0.0073757534 -0.0004822909 -0.0006387996 -0.0002887879 -0.0111270283 -0.0049643300 0.0053241485 -0.0000026544 -0.0000287199 0.0000129796 -0.0000214638 0.0000600857 0.0000030525 0.0439161839 -0.1146577270 -0.1733659894 -0.6352864608 -0.2630053994 -0.2116161913 -0.2138678836 -0.3470859399 0.4704505088 -0.0008607058 0.0007745685 0.0002063109 0.0055590237 0.0011353280 -0.0006256102 0.0014132214 0.0037708861 0.0047579623 0.0193141064 -0.0231045013 0.0065484228 0.0968536734 0.0473559274 0.0073469278 0.0160357307 0.0345319039 -0.0768660729 -0.0000543551 -0.0006234851 0.0004918615 0.0004604381 -0.0000324264 -0.0002121573 -0.0001412152 0.0000808899 -0.0002319908 0.0000053505 -0.0000059842 0.0000076296 0.0000067618 -0.0000345997 -0.0000388230 0.0000110560 0.0000022042 0.0000082445 -0.0000135443 0.0000039589 -0.0000007580 0.0000065910 -0.0000015457 0.0000036704 -0.0000122311 -0.0000001919 -0.0000086042 -0.0001227240 0.0002835680 0.0004150174 -0.0000707504 -0.0000366960 -0.0000885320 0.0000319158 -0.0000067274 0.0000000318 0.0000011313 0.0000152315 -0.0000000587 0.0000812249 0.0000163280 0.0000794675 -0.0000374300 -0.0000435734 -0.0001332698 0.0000181860 0.0000007846 0.0000282067 -0.0000083249 -0.0000057878 -0.0000116470 0.0000056217 0.0000018617 -0.0000004934 -0.0000210366 -0.0000126457 0.0000144747 0.0003602940 0.0004739109 0.0009742860 0.0000621554 -0.0000230409 -0.0002023921 0.0000110158 0.0000093242 0.0000073103 0.0000083666 0.0000075254 0.0000508301 0.0001433618 0.0000947942 -0.0000986702 -0.0000103143 0.0000038372 0.0000052736 -0.0000140885 -0.0000019864 -0.0000034283 -0.0000046439 -0.0000025520 -0.0000042004 -0.0000096020 0.0000108908 0.0000058536 0.0000050341 0.0000030091 -0.0000016911 -0.0000102607 -0.0000068961 0.0000046067 -0.0000022042 0.0000223878 -0.0000086336 0.0000126728 0.0000040767 -0.0000035432 -0.0000095549 -0.0002715206 0.0001083622 -0.0000776407 -0.0000347798 0.0000259506 0.0000038681 -0.0000052558 0.0000012916 0.0000157597 -0.0000107576 0.0000015953 -0.0000169914 0.0000854833 -0.0000259313 -0.0001661093 0.0001162665 -0.0000117326 -0.0000117894 0.0000022407 -0.0000131074 0.0000002183 -0.0000020185 0.0000087273 0.0000001348 0.0000066026 0.0000009653 0.0000117459 0.0000136864 0.0000114046 -0.0000163227 -0.0000644354 0.0000100342 -0.0001037537 -0.0001323496 -0.0000785949 -0.0000118069 -0.0000359596 0.0000129539 0.0000105719 0.0000007966 0.0000188677 0.0000954010 0.0004099653 -0.0002190556 -0.0000567986 0.0000302838 -0.0001248272 0.0003159166 -0.0004114221 -0.0005672094 0.0001008000 0.0037255160 0.0050563959 -0.0034652550 0.0018549346 0.0003446135 0.0002582059 -0.0011409700 0.0014004226 -0.0007555288 -0.0014242201 0.0125611711 -0.0375999401 0.0196257599 -0.0544004257 0.0560638317 0.0651892241 -0.0476332310 -0.0104304814 -0.0664932673 -0.0468882694 0.0000102185 0.0000023166 -0.0000020068 0.0000055146 -0.0002182632 0.0000801852 -0.0000017574 0.0000238269 -0.0000087829 0.0000126206 -0.0000010024 -0.0000012977 -0.0000604872 -0.0000186378 0.0000153564 -0.0000346504 0.0000123174 -0.0000567712 0.0000075099 0.0000028116 0.0000113164 -0.0000009731 -0.0000034261 -0.0000018609 0.0000008952 -0.0000034556 0.0000063008 -0.0000015255 0.0000202255 -0.0000083894 0.0000871535 -0.0000197800 0.0000079476 0.0000604944 0.0000554591 0.0000032423 -0.0001350150 -0.0000761511 0.0000946089 -0.0001031327 -0.0000336413 -0.0000533158 0.0000151236 0.0000227706 -0.0000608994 0.0003717285 -0.0004718282 0.0005884791 0.0001666768 -0.0003156487 -0.0001087901 -0.0000929869 0.0000390177 0.0000232276 0.0000506370 0.0001603475 0.0004780759 -0.0000913291 0.0000006567 0.0000382362 0.0001240485 0.0000661440 -0.0000453897 -0.0001212288 -0.0002167026 0.0002880361 0.0002916943 0.0001466024 0.0000317700 0.0009191913 0.0003048496 -0.0003493032 -0.0006364141 -0.0013899483 0.0000516490 0.0011612883 0.0003019764 -0.0008589017 0.0000631864 0.0000022991 -0.0003766625 -0.0003184152 -0.0000026357 0.0001891314 0.0010558074 0.0015915491 0.0001925956 -0.0000107627 -0.0000246893 -0.0000121442 0.0000016135 -0.0000182472 -0.0000037299 -0.0000299111 -0.0000507145 0.0000081469 0.0000481447 0.0000141707 -0.0000300049 0.0000039285 -0.0000112985 -0.0000043934 0.0000286745 -0.0000018866 -0.0000135276 0.0002203000 0.0004674806 -0.0000193631 -0.0003748791 0.0001014507 0.0002505658 0.0000933237 0.0000772140 -0.0000288111 -0.0003602884 -0.0000163888 0.0001511895 -0.0000554357 0.0001179785 0.0000468898 -0.0004179449 -0.0001018858 -0.0000570335 0.0056230651 0.0001161326 0.0001569932 -0.0000264900 0.0000018945 0.0000490953 0.0009012679 0.0000571377 -0.0002744397 -0.0000518929 0.0001848979 -0.0003749156 0.0000159708 -0.0001906890 -0.0000947510 0.0000264112 -0.0000645752 -0.0000068883 -0.0092701790 -0.0089341019 -0.0012509440 -0.0015030350 -0.0038309189 -0.0012744313 0.0028261288 0.0015893156 -0.0016645152 0.0000274011 -0.0000727700 0.0000332941 -0.0000644730 0.0001828771 -0.0002139931 -0.0092777507 0.0277346254 0.0385444918 0.0975131166 0.0410071585 0.0319793287 0.0250224406 0.0411857285 -0.0554502388 -0.0151906349 0.0218860876 -0.0019588359 0.0261299874 0.0066842548 -0.0032652158 0.0057843733 0.0145835169 0.0207822966 -0.0033463892 0.0043054504 -0.0012042386 -0.0258822904 -0.0127672946 -0.0020822815 -0.0048647829 -0.0103259031 0.0232743236 -0.0004134136 -0.0023966406 0.0017294479 0.0001805229 -0.0000028284 -0.0000766987 0.0010686377 0.0000215834 0.0011858151 0.0000019866 -0.0000058887 0.0000105674 0.0000027307 -0.0000260270 -0.0000275699 0.0000164101 0.0000020743 0.0000126109 -0.0000171167 -0.0000028813 0.0000026871 0.0000054825 -0.0000042545 0.0000117700 -0.0000076602 -0.0000015877 -0.0000045837 -0.0000839720 0.0001922171 0.0003039343 -0.0001244580 -0.0000413705 -0.0001354445 0.0000295908 0.0000002491 0.0000182424 0.0000081974 -0.0000034095 -0.0000139904 0.0000382183 0.0000085234 0.0000333635 0.0000555303 -0.0000045438 0.0000514129 0.0002077161 -0.0000177562 -0.0002291272 0.0000118807 0.0000216836 0.0000670208 0.0000471585 0.0000170286 -0.0000343932 -0.0000247157 -0.0000253514 -0.0000311686 -0.0002175161 -0.0001883267 -0.0009295414 -0.0024216844 -0.0003994216 0.0017448580 -0.0001197501 0.0000391809 0.0001094016 0.0000727858 0.0000457960 0.0001850424 0.0000769549 0.0000475946 -0.0000726306 -0.0000075453 -0.0000007383 -0.0000029289 -0.0000177625 -0.0000055999 -0.0000079658 0.0000076224 -0.0000246797 -0.0000533984 0.0000519267 0.0000478425 -0.0000236311 0.0000016050 0.0000012502 -0.0000012399 -0.0000061468 -0.0000024443 0.0000013918 -0.0000006756 0.0000163199 -0.0000068062 0.0000092992 0.0000034978 -0.0000033269 -0.0000066376 -0.0001891436 0.0000728034 -0.0000755898 -0.0000331493 0.0000207445 0.0000029760 0.0000006906 -0.0000016270 0.0000076115 -0.0000063868 0.0000005381 -0.0000186389 -0.0000039804 0.0000075810 -0.0000904812 0.0000603953 -0.0000099009 -0.0000000784 0.0000022389 -0.0000045213 0.0000004943 0.0000003842 0.0000017623 0.0000010418 0.0000000871 -0.0000004828 0.0000073441 0.0000077873 0.0000043302 -0.0000075765 -0.0000242618 0.0000122376 -0.0000707171 -0.0000845797 -0.0000524787 -0.0000018072 -0.0000069317 0.0000016806 0.0000045559 -0.0000009095 0.0000068093 0.0000130639 0.0000874483 -0.0000490391 -0.0000296193 0.0000140788 -0.0000611265 0.0020405445 -0.0023243741 -0.0022570133 0.0004355084 0.0166050774 0.0227094958 -0.0207565150 0.0111942198 0.0022500608 0.0009281060 -0.0021889462 0.0024728467 -0.0014261658 -0.0201660638 0.0862473055 -0.3127883058 0.1680559056 -0.4510589623 0.3751684884 0.4405950447 -0.3195299654 -0.0601408653 -0.3628817967 -0.2551034156 -0.0000026010 -0.0000050018 0.0000016940 0.0000061543 0.0000968622 -0.0000387914 0.0000023194 -0.0000075477 0.0000031335 -0.0000062083 -0.0000002656 0.0000005347 0.0000360353 0.0000129307 -0.0000095846 0.0000050487 -0.0000034396 0.0000088779 -0.0000015646 -0.0000003129 -0.0000008770 0.0000052584 0.0000164585 -0.0000080952 -0.0000028178 -0.0000012763 -0.0000016530 -0.0000496616 -0.0001791512 0.0000993864 -0.0000124157 0.0000120653 -0.0000028552 -0.0000170293 -0.0000028128 0.0000198572 0.0000113674 -0.0000093022 -0.0000174562 -0.0000005947 -0.0000052038 -0.0000042836 0.0000002677 0.0000033435 0.0000122424 0.0002692406 0.0004932731 -0.0000561926 -0.0000071942 0.0000105847 0.0000056205 -0.0000054774 -0.0000114431 -0.0000004388 -0.0000080589 0.0000085696 0.0000180963 0.0000137188 0.0000137109 -0.0000032531 0.0000064297 -0.0000049722 -0.0000061482 0.0000097391 0.0000050689 -0.0000024174 -0.0000028631 -0.0000182650 -0.0000053920 -0.0001693567 -0.0000511786 0.0000647311 0.0000204150 0.0000454269 0.0000001518 -0.0001088109 -0.0000093058 0.0000791798 0.0000142602 -0.0000388424 -0.0000391342 -0.0000033176 0.0000119031 0.0000820412 -0.0003478993 -0.0003157749 -0.0001206629 -0.0000004562 -0.0000087688 -0.0000095721 0.0000028314 -0.0000041509 -0.0000035734 0.0000033250 0.0000131924 0.0000004575 0.0000306842 0.0000077388 -0.0000084352 -0.0000141535 -0.0000259760 0.0000016534 0.0000166200 -0.0000001739 -0.0000106553 -0.0000311804 -0.0000770492 0.0000149281 -0.0003780160 -0.0000274748 0.0001562430 0.0001237464 0.0002591584 -0.0000118294 -0.0001399981 -0.0000026870 0.0000860148 -0.0000108427 0.0000202705 0.0000276353 0.0000987706 0.0000180307 -0.0000001001 -0.0014857736 -0.0001112111 -0.0000011535 -0.0000037973 -0.0000065504 -0.0000029435 -0.0000086674 -0.0000451388 -0.0000910682 0.0000560121 0.0001624722 0.0001265352 0.0002423487 0.0000911314 0.0000041193 -0.0006655859 -0.0003037856 0.0001009145 -0.0098826627 -0.0088924472 0.0004052466 0.0020079019 -0.0008775269 -0.0000581475 -0.0830124202 -0.0264931960 0.0283512641 0.0000343476 -0.0000542473 -0.0000651546 -0.0004927236 0.0003687162 0.0000109224 -0.0064803982 0.0186172309 0.0274012164 0.0977326154 0.0400244244 0.0323997988 0.0293651330 0.0488246855 -0.0651282826 -0.0107256533 0.0151640050 -0.0013992261 -0.0128198075 -0.0040603942 0.0011534334 0.0005604982 -0.0005171949 -0.0003648589 0.2038412991 -0.2290919986 0.0611575472 0.7023229473 0.3490696898 0.0534741924 0.0916003445 0.1999561147 -0.4533808051 -0.0004956991 -0.0037585703 0.0030312517 0.0058592886 -0.0003173516 -0.0027400486 0.0007886297 0.0001952029 0.0000221877 0.0000046275 -0.0000046032 -0.0000103886 0.0000055035 -0.0000016905 0.0000001645 -0.0000103985 -0.0000005811 -0.0000054605 -0.0000005827 -0.0000090453 -0.0000014625 -0.0000119401 0.0000206930 0.0000237781 0.0000238858 0.0000086979 0.0000258088 -0.0000044037 0.0000375148 0.0000191545 0.0000720923 0.0000376616 0.0000787936 -0.0000356002 -0.0000042901 -0.0000116980 0.0000950438 -0.0001581672 -0.0003009999 -0.0001898425 -0.0000656028 -0.0002542551 0.0000106190 0.0000109201 0.0000290376 0.0000019546 -0.0000025036 -0.0000134546 0.0000055558 0.0000038923 0.0000055487 -0.0000004584 0.0000006619 0.0000023343 0.0000041723 0.0000023704 -0.0000024548 -0.0000728419 -0.0001253063 -0.0002711925 -0.0000987067 -0.0000043577 0.0000847992 -0.0000173517 -0.0000026303 0.0000032831 -0.0000031954 -0.0000059722 -0.0000343721 -0.0000266965 -0.0000241382 0.0000128347 0.0000085835 -0.0000002129 0.0000060581 0.0000181382 0.0000056255 0.0000085556 0.0000035727 0.0000000326 -0.0000003890 0.0000097104 0.0000004442 -0.0000034295 -0.0000018526 -0.0000009374 0.0000003219 0.0000026100 0.0000020505 -0.0000018137 0.0000012610 -0.0000090764 0.0000035968 -0.0000080718 -0.0000021678 0.0000022660 0.0000066508 0.0001155399 -0.0000477124 0.0000618577 0.0000277561 -0.0000215231 -0.0000004992 0.0000096276 -0.0000028073 -0.0000079925 0.0000044518 -0.0000003074 0.0000049107 -0.0001193073 0.0000344710 0.0000735624 -0.0000509129 0.0000046412 0.0000027738 0.0000003903 0.0000026966 -0.0000001949 0.0000003766 -0.0000008287 0.0000002327 0.0000063223 -0.0000036010 -0.0000027974 -0.0000035804 -0.0000009281 -0.0000001948 -0.0000687216 0.0000361576 0.0000345311 0.0000357200 0.0000216156 0.0000025580 0.0000104891 -0.0000043458 -0.0000036893 0.0000011025 -0.0000065947 -0.0000238801 -0.0001180556 0.0000606867 0.0000344242 -0.0000154189 0.0000620947 0.0001111238 -0.0000968954 -0.0000630253 0.0000337341 0.0004918640 0.0006608598 -0.0011687439 0.0006357362 0.0001682867 -0.0000041896 0.0000162112 -0.0000260718 -0.0000011182 -0.0005916539 0.0015389601 -0.0064429375 0.0035089567 -0.0092408429 0.0067564968 0.0081231925 -0.0058589097 -0.0008295170 -0.0045366990 -0.0031609276 -0.0000023236 0.0000038693 -0.0000013755 -0.0000090314 0.0000752884 -0.0000276361 -0.0000010057 -0.0000104701 0.0000034775 0.0000001249 0.0000006426 -0.0000004349 0.0000021622 -0.0000011930 -0.0000016754 -0.0000030994 0.0000009506 -0.0000069107 0.0000019369 0.0000041142 0.0000002657 -0.0000026916 -0.0000087585 0.0000059929 -0.0000009226 0.0000003524 0.0000004013 0.0000263548 0.0000794908 -0.0000579381 0.0000052141 -0.0000056618 0.0000052746 0.0000109879 -0.0000098037 -0.0000014461 -0.0000009719 0.0000115376 -0.0000056983 0.0000021125 -0.0000173076 0.0000109098 0.0000015702 -0.0000086111 0.0000075575 -0.0000847363 -0.0000923411 0.0000464227 -0.0000273966 0.0000405966 0.0000213612 0.0000029682 -0.0000045187 -0.0000023682 -0.0000050860 -0.0000012367 0.0000012069 0.0000012972 -0.0000021834 -0.0000003474 -0.0000025972 -0.0000075291 -0.0000005229 0.0000053209 0.0000036611 -0.0000038826 0.0000030155 0.0000107189 -0.0000004018 -0.0000070562 0.0000023060 -0.0000009105 0.0000325283 0.0000695651 0.0000006552 -0.0000551708 -0.0000112767 0.0000274034 0.0000050178 0.0000057342 0.0000008593 -0.0000095869 -0.0000048595 -0.0000096078 0.0001120229 0.0001132761 0.0000244716 0.0000042270 0.0000082560 -0.0000016206 0.0000001134 0.0000139977 0.0000065251 -0.0000096383 -0.0000140290 0.0000032577 -0.0000321803 -0.0000008845 0.0000091674 -0.0000132570 -0.0000229748 0.0000025604 -0.0000072131 -0.0000021053 0.0000021181 0.0000784187 0.0001485731 -0.0000116526 0.0003670486 0.0000430746 -0.0000524230 0.0002009138 0.0002339452 -0.0000162551 0.0000421496 -0.0000046563 -0.0000201008 0.0000919604 -0.0001953187 -0.0000673404 0.0000131852 -0.0000080653 -0.0000028627 -0.0002538411 0.0000380017 0.0000109798 0.0000016533 0.0000004745 -0.0000006629 -0.0000150547 0.0000032873 0.0000071492 0.0000396291 -0.0000027439 -0.0000169317 0.0000238886 -0.0001040633 0.0000984236 -0.0002333429 0.0003957104 -0.0003658992 0.0015031060 0.0009322607 -0.0015139514 0.0020280912 -0.0005671481 -0.0002587817 -0.0396358896 0.0611377314 -0.0584467163 -0.0000076526 -0.0000038908 0.0000063464 -0.0000401835 -0.0001446033 0.0003483146 -0.0007665395 0.0037129677 0.0047183692 -0.0085901262 -0.0039379609 -0.0034353969 -0.0078738903 -0.0135714048 0.0174860688 -0.0061406507 0.0087383328 0.0002234507 -0.0185037294 -0.0055116779 0.0019335410 0.0014939631 0.0024114846 0.0032867165 0.5147689928 -0.5403927250 0.1330844201 0.0940372923 0.0563129291 -0.0004368914 -0.1328938483 -0.2491768156 0.5687818734 0.0007453661 0.0018342152 -0.0013655561 0.0019505322 -0.0002242066 -0.0006358864 -0.0021979214 0.0001728082 -0.0022299786 -0.0000069287 0.0000077003 -0.0000051227 -0.0000010688 0.0000115651 0.0000087284 0.0000056507 0.0000007873 0.0000023543 0.0000092740 -0.0000021921 0.0000082616 0.0000034979 -0.0000184794 -0.0000298982 0.0000020811 -0.0000001471 -0.0000089264 0.0000303789 -0.0000952893 -0.0001134961 -0.0000186547 -0.0000063593 -0.0000132555 -0.0000004789 0.0000177390 0.0000457081 -0.0001349139 0.0001850360 0.0003308313 -0.0000067403 0.0000114698 0.0000386884 -0.0000001740 0.0000035507 0.0000095210 -0.0000033469 0.0000000503 0.0000029169 0.0000013102 0.0000004678 -0.0000004865 -0.0000008741 -0.0000008887 -0.0000001774 -0.0000006104 0.0000003368 0.0000021460 0.0000084264 -0.0000646943 -0.0001327822 0.0000176728 0.0000002953 -0.0000332570 -0.0000042023 -0.0000028810 -0.0000044498 -0.0000055708 0.0000085535 0.0000175956 0.0000131042 0.0000092336 -0.0000099113 0.0000049602 -0.0000052755 -0.0000241259 -0.0000093842 -0.0000071050 -0.0000128785 0.0000015002 0.0000016034 0.0000030894 0.0000019195 -0.0000001990 0.0000010885 0.0000005570 0.0000001237 0.0000002363 0.0000016054 -0.0000006885 0.0000009518 -0.0000007325 -0.0000029444 0.0000012864 0.0000019003 -0.0000001372 -0.0000001953 -0.0000019310 0.0000227921 -0.0000088903 -0.0000120717 -0.0000077030 0.0000042642 -0.0000016051 -0.0000184446 0.0000066120 0.0000031781 0.0000001120 -0.0000003024 0.0000046156 0.0002139319 -0.0000686336 -0.0000107848 0.0000067101 -0.0000021607 -0.0000016338 -0.0000017554 -0.0000022168 -0.0000002768 -0.0000000053 0.0000003057 -0.0000005734 -0.0000020286 0.0000018900 0.0000018717 0.0000036847 0.0000018795 0.0000096821 0.0000391533 -0.0000292391 -0.0000164720 -0.0000282654 -0.0000201016 -0.0000033487 -0.0000110587 0.0000057973 0.0000030979 -0.0000006717 0.0000073784 0.0000306011 0.0001106897 -0.0000641620 -0.0000240524 0.0000087915 -0.0000618811 0.0000091607 -0.0000038399 -0.0000472224 -0.0000024674 0.0001652522 0.0002161738 -0.0001832016 0.0000958138 0.0000190787 0.0000394693 -0.0002287400 0.0002864776 -0.0000336969 0.0001324520 -0.0005926653 0.0023831619 -0.0013741043 0.0034464832 -0.0023369721 -0.0026686915 0.0018972327 0.0004217949 0.0023857497 0.0017054691 0.0000011518 -0.0000011223 0.0000001749 0.0000046921 -0.0000188825 0.0000059814 0.0000003382 0.0000027383 -0.0000008705 0.0000010194 -0.0000009038 0.0000012126 -0.0000024905 -0.0000014715 0.0000008383 -0.0000003272 -0.0000016447 0.0000024791 0.0000000773 -0.0000000047 -0.0000003701 0.0000028956 0.0000068112 -0.0000057333 -0.0000016726 -0.0000030742 0.0000002484 -0.0000271628 -0.0000596976 0.0000304216 0.0000003029 0.0000057230 0.0000004664 0.0000040367 0.0000070941 0.0000012100 -0.0000016037 -0.0000081477 -0.0000001595 0.0000241262 0.0000196303 -0.0000047249 0.0000013472 0.0000061652 -0.0000029758 -0.0004760593 -0.0007836042 0.0000454585 0.0000702797 -0.0000169704 0.0000313132 0.0000222676 0.0000106086 -0.0000089547 0.0000031541 -0.0001635487 -0.0000762106 0.0000167458 -0.0000185155 -0.0000183772 -0.0001558101 -0.0000791176 0.0000508693 0.0017117503 0.0004136970 -0.0010647670 -0.0000579181 -0.0000077425 0.0000384384 -0.0001750039 -0.0000448431 0.0000918564 0.0010491748 0.0021684621 0.0001317417 -0.0185466892 -0.0043854048 0.0108365410 -0.0000105735 0.0000530763 0.0000619850 -0.0008951161 -0.0009597249 -0.0000683192 0.0109536263 0.0110820994 0.0005693644 0.0000758996 0.0001507854 -0.0000762092 0.0000429010 0.0000017630 -0.0000208849 -0.0009930912 -0.0018259236 0.0001879766 -0.0000161977 -0.0000245143 -0.0000001696 -0.0000207534 0.0000310680 0.0000155535 0.0001706229 0.0000452205 -0.0000863071 0.0118341557 0.0199288457 -0.0013184765 -0.0000353444 -0.0000392578 -0.0000538752 -0.0000704691 -0.0001461269 0.0000299014 -0.0028191431 -0.0000822396 0.0011418718 -0.0001148908 0.0001813432 0.0001258572 0.0000185877 0.0000203984 0.0000000413 -0.0001438227 -0.0000181772 0.0000134528 -0.0000048888 -0.0000053257 -0.0000003810 0.0001475153 -0.0007131273 -0.0001446495 0.0007638704 0.0002215481 -0.0006135643 -0.0000734582 0.0000118246 0.0001057639 -0.0000024396 -0.0000141005 0.0000008392 -0.0002507898 0.0001823239 0.0011850063 0.0001005335 0.0006620808 0.0003336258 0.0000970519 0.0000123790 -0.0000172530 -0.0004044714 -0.0002621789 -0.0000335127 0.0001847565 0.0002560151 0.0001687096 0.0014976376 -0.0059863308 -0.0081067914 -0.0011708280 -0.0004773267 -0.0002060605 0.0027138013 0.0042704136 -0.0058506542 0.0024300686 -0.0033879254 0.0003226609 -0.0023283107 -0.0005531634 0.0003236443 -0.0012814170 -0.0037457485 -0.0046430940 -0.0003593150 0.0004397727 -0.0001110218 -0.0007376440 -0.0003468908 -0.0000376257 -0.0000435954 -0.0001722336 0.0003657029 -0.0003855214 -0.0025757936 0.0016618895 -0.0000506241 0.0000004877 0.0000120296 -0.0026607895 -0.0001848611 -0.0030097022 0.0000023651 -0.0000009759 0.0000003409 0.0000007544 -0.0000076658 -0.0000086961 0.0000004189 -0.0000000840 -0.0000000049 -0.0000023079 0.0000034514 -0.0000005595 0.0000023334 -0.0000032507 -0.0000037660 -0.0000037664 0.0000012105 -0.0000013573 -0.0000244132 0.0000707627 0.0000828316 0.0000030514 -0.0000152514 -0.0000144365 0.0000157743 -0.0000025489 -0.0000026169 -0.0000065083 0.0000437536 0.0000436436 0.0000236533 0.0000055795 0.0000179614 0.0000106350 0.0000048815 -0.0000049827 -0.0000481991 -0.0000122796 0.0000356478 0.0000105330 0.0000051926 0.0000017604 -0.0000039738 -0.0000002764 0.0000055762 0.0000091081 0.0000043403 -0.0000018876 -0.0000257442 0.0000016262 -0.0000048713 0.0003334420 0.0001548293 -0.0004209593 -0.0000724954 0.0000142503 0.0000651339 -0.0000061594 -0.0000170206 -0.0000246794 -0.0000559080 -0.0000253772 0.0000495289 -0.0000054116 0.0000014366 0.0000030204 -0.0000067454 -0.0000015251 -0.0000002546 0.0000115017 -0.0000142054 -0.0000376867 0.0000515068 -0.0000102588 -0.0000304331 -0.0000001562 0.0000002875 -0.0000001605 -0.0000014371 0.0000004436 -0.0000002603 0.0000001514 0.0000000091 0.0000001325 0.0000024598 0.0000015759 -0.0000008076 0.0000022361 -0.0000007166 0.0000003243 -0.0000258066 -0.0000145381 0.0000115106 0.0000007715 0.0000113671 -0.0000035620 0.0000030394 -0.0000031026 0.0000007605 -0.0000015408 -0.0001344338 0.0000422571 -0.0000407606 0.0000246987 0.0000013457 0.0000006479 0.0000006488 0.0000004801 -0.0000010525 0.0000003512 0.0000003276 0.0000001384 0.0000041161 -0.0000023394 0.0000061280 0.0000066982 0.0000050266 -0.0000084478 -0.0000513443 0.0000311174 -0.0000596275 -0.0000675457 -0.0000379541 -0.0000016793 -0.0000048975 0.0000018525 0.0000058859 -0.0000011701 0.0000104406 0.0000058445 0.0000612664 -0.0000307000 -0.0000577808 0.0000260543 -0.0001021498 0.0590522897 -0.0623122606 -0.0377501165 0.0276980593 0.3320732522 0.4425378896 -0.7235876468 0.3704856923 0.0972592325 -0.0070737861 0.0471656693 -0.0861400611 0.0015280001 0.0039404179 -0.0021472623 0.0088687329 -0.0039789391 0.0122915783 -0.0271220209 -0.0313236719 0.0251492527 -0.0033711905 -0.0099318414 -0.0076665879 0.0000235766 0.0000026530 -0.0000033334 -0.0000001389 -0.0006327340 0.0002280521 -0.0000012464 0.0000664892 -0.0000240763 0.0000230096 0.0000004395 -0.0000011674 -0.0001055129 -0.0000209936 0.0000291531 -0.0000983574 0.0000318630 -0.0001674879 0.0000199033 0.0000032143 0.0000178621 -0.0000389097 -0.0001451039 0.0000595083 0.0000024637 -0.0000265360 0.0000157166 0.0004032420 0.0015296729 -0.0009306820 0.0002016271 -0.0000457863 0.0000642891 0.0002109285 0.0001800266 0.0000406059 -0.0004066081 -0.0002035963 0.0001917902 0.0002444842 0.0004491271 0.0002395566 0.0001013350 0.0001019917 -0.0001750751 0.0000043081 -0.0002547301 -0.0001414818 -0.0000035175 0.0000016520 0.0000577341 -0.0000240281 0.0000071592 0.0000034341 0.0000183759 0.0000020980 0.0000251059 -0.0000742174 0.0000070287 0.0000348610 0.0000510471 0.0000226778 -0.0000189030 -0.0001778449 -0.0000632726 0.0002056633 0.0000621588 -0.0000041735 -0.0000190833 0.0007482307 0.0002152931 -0.0002344265 -0.0002406445 -0.0005538679 0.0000153615 0.0020728368 0.0004749498 -0.0012423650 -0.0000395684 0.0000396252 0.0000432168 0.0000341623 0.0000293088 -0.0000687783 -0.0001966260 -0.0001332819 -0.0000293106 -0.0000007421 -0.0000050974 0.0000024948 0.0000041349 -0.0000147024 -0.0000024754 0.0000200856 0.0000352729 -0.0000046031 0.0000167119 -0.0000044580 -0.0000026124 0.0000176999 0.0000304766 -0.0000011977 -0.0000116858 0.0000015033 0.0000068467 -0.0002102303 -0.0003643030 0.0000044681 -0.0002558498 -0.0000046366 0.0000188083 -0.0001872429 -0.0002949478 0.0000052287 0.0001646357 0.0000052956 -0.0000894663 -0.0000983075 0.0001920528 0.0000380111 -0.0004179840 -0.0000183733 0.0000099352 0.0065411263 -0.0000552912 0.0002196446 -0.0000571870 -0.0000009484 0.0000314503 0.0001670321 -0.0000310627 0.0000950415 -0.0000872476 -0.0002510689 -0.0000809147 0.0002053098 0.0001270594 0.0000031522 -0.0003329523 0.0003590970 0.0001726158 -0.0124635965 0.0218200348 0.0886622156 0.0038125662 0.0030764892 0.0020627579 -0.0006628997 0.0005380125 -0.0005510900 0.0000181595 0.0000279054 0.0000045362 0.0003566033 -0.0002439062 0.0003040682 0.1310631453 -0.4802098708 -0.6612634829 -0.1543091895 -0.0632305104 -0.0422296448 0.1732040076 0.2723776762 -0.3658846609 0.0014895626 -0.0017306019 0.0008359783 -0.0393996714 -0.0110426270 0.0046962566 -0.0075385681 -0.0249075452 -0.0303241606 0.0097657652 -0.0114076281 0.0016874135 0.0020434944 0.0014929567 0.0002064409 -0.0010960217 -0.0015648829 0.0044917848 0.0005131538 0.0027238016 -0.0021870597 -0.0023897679 0.0000970641 0.0010432816 -0.0024873835 -0.0000201303 -0.0025306051 0.0000194173 -0.0000061346 -0.0000015523 0.0000406595 -0.0001356195 -0.0001408138 -0.0000093771 -0.0000017700 -0.0000035801 -0.0000095725 0.0000065833 0.0000029334 0.0000004164 0.0000031335 -0.0000047024 0.0000161077 0.0000159840 0.0000262744 -0.0004692298 0.0012661551 0.0014530388 0.0001097505 0.0000065437 0.0000286717 0.0000171681 -0.0000105754 -0.0000243379 -0.0000269958 0.0001069633 0.0000524104 -0.0002100839 -0.0000809319 -0.0002723223 -0.0000659107 -0.0001776061 -0.0006640724 -0.0000074883 -0.0000027461 0.0001157631 -0.0000002320 0.0000021410 -0.0000204874 -0.0000010812 0.0000003903 0.0000203718 0.0000134902 -0.0000026400 0.0000115191 0.0003840718 0.0027121195 0.0065533482 0.0008451275 0.0002519382 -0.0008810627 0.0000096155 0.0000335306 0.0000320875 -0.0000052930 -0.0000892260 -0.0002125187 -0.0001557371 0.0000330827 0.0000820223 -0.0000099701 0.0000066781 0.0000168044 -0.0000034126 0.0000018152 0.0000051350 -0.0000090483 -0.0000142486 -0.0000185147 -0.0000094005 0.0000128076 0.0000036779 0.0000028411 0.0000016992 -0.0000014852 -0.0000103567 -0.0000050099 0.0000016415 -0.0000002711 0.0000413435 -0.0000156356 0.0000120802 0.0000045310 -0.0000031209 -0.0000160792 -0.0004657605 0.0001794581 -0.0000843835 -0.0000350458 0.0000251101 0.0000047556 -0.0000004126 0.0000004234 0.0000154782 -0.0000119532 0.0000026294 -0.0000304306 0.0000177803 0.0000013598 -0.0001822353 0.0001247876 -0.0000118010 -0.0000020152 0.0000086581 -0.0000102707 0.0000103129 0.0000048333 0.0000203374 0.0000045456 0.0000397172 -0.0000148006 0.0000334524 0.0000372926 0.0000304562 -0.0000574170 -0.0004429200 0.0001952388 -0.0003099148 -0.0003753363 -0.0002281160 -0.0000177976 -0.0000579112 0.0000257493 0.0000181218 0.0000015108 0.0000315782 0.0001493673 0.0006958818 -0.0003746344 -0.0001056620 0.0000620560 -0.0002266838 -0.0010818667 0.0011855337 0.0007981217 -0.0008429699 -0.0071934370 -0.0092726178 0.0128300059 -0.0068696711 -0.0019340890 0.0000389241 -0.0004632593 0.0011547861 0.0059109084 0.0154280154 0.0054510037 -0.0032182142 0.0046793989 -0.0066075104 -0.0423398610 -0.0527541962 0.0425068339 -0.0215006931 -0.1327002579 -0.0994022090 -0.0000098291 0.0000058576 -0.0000150935 -0.0000154739 -0.0002896492 0.0001127550 -0.0000051335 0.0000231696 -0.0000066492 -0.0000031414 -0.0000077700 -0.0000076343 -0.0000821079 0.0000598576 0.0000293181 0.0000031265 0.0000011314 0.0000029588 0.0000020755 0.0000072573 -0.0000011559 -0.0000066062 -0.0000267084 0.0000191373 -0.0000003569 0.0000015293 -0.0000022336 0.0000728102 0.0002578215 -0.0001650451 -0.0000254017 -0.0000202579 -0.0000070941 -0.0003239175 0.0000059027 0.0000556497 0.0001250001 0.0000529384 -0.0000307547 -0.0000699504 0.0000374282 0.0000831685 -0.0000355862 -0.0000263560 0.0000222183 -0.0007738090 -0.0000406718 0.0001490522 0.0001516430 -0.0002251397 -0.0001724848 -0.0000135112 0.0000172822 0.0000153556 0.0000085604 0.0000038069 -0.0000120511 0.0000098266 0.0000162793 -0.0000017733 -0.0000089869 -0.0000092921 0.0000026183 0.0000398357 0.0000068252 -0.0000365695 -0.0000397159 -0.0000839219 -0.0000076604 -0.0000858480 -0.0000281800 0.0000357901 0.0000934509 0.0002047340 0.0000090155 -0.0004435703 -0.0000853732 0.0002495958 0.0000414794 0.0000217028 -0.0000034474 -0.0000826912 -0.0000051413 -0.0000218849 0.0005774694 0.0004915034 0.0000771126 0.0000197339 0.0000923378 0.0000026015 -0.0000041873 0.0000165672 0.0000153663 -0.0000312814 -0.0000824649 0.0000139951 -0.0014563892 -0.0001224121 0.0005222304 0.0002551126 0.0003333733 -0.0000675462 -0.0000115554 -0.0000064453 0.0000028235 0.0003526213 0.0007538158 -0.0000289592 0.0153424485 0.0003400669 -0.0069793856 -0.0027011586 -0.0046523291 0.0005968612 -0.0000246740 0.0000045859 -0.0000139193 0.0000019370 -0.0000753232 -0.0000260545 -0.0000511893 0.0000287523 0.0000326715 0.0012880868 0.0000597329 -0.0004322193 0.0000037499 0.0000022804 0.0000027123 -0.0000125061 0.0000580600 0.0000574198 -0.0001493551 -0.0001746777 -0.0000976374 0.0004150543 0.0002455490 -0.0001203737 -0.0006556702 0.0000144224 0.0001493581 -0.0008904593 0.0006037824 0.0037370752 -0.0908768465 0.0143631526 -0.0043911058 -0.0026030070 0.0006123842 -0.0006840795 0.0000477433 0.0000015797 -0.0000024011 0.0003707615 -0.0002890165 0.0005008300 0.0054179201 -0.0203197364 -0.0273895951 -0.0014230476 -0.0006925404 -0.0001348843 0.0080188792 0.0127325263 -0.0169519154 0.3256310930 -0.4784791973 0.0456956608 0.7584400949 0.2252785626 -0.0935801850 0.0147470173 0.0818653224 0.0960159609 0.0151109486 -0.0165059592 0.0033287868 0.0183028796 0.0094252681 0.0013462534 -0.0006312598 -0.0016164108 0.0035867492 0.0007518585 0.0035835211 -0.0029003253 -0.0016728177 0.0000174919 0.0007598482 -0.0035860342 -0.0000313415 -0.0037732576 -0.0000506987 -0.0000610472 0.0002083331 -0.0000337844 -0.0000009556 0.0001312848 0.0000200473 0.0000764890 0.0001128162 -0.0000365587 0.0001160877 -0.0001344615 0.0000318433 -0.0000461195 0.0001010974 0.0000260634 -0.0000625783 0.0000958829 0.0002636067 -0.0009438685 -0.0009438117 -0.0012459262 -0.0005963046 -0.0010269628 0.0001328470 -0.0000450044 -0.0002231894 0.0001906145 -0.0004425956 -0.0005392494 -0.0009905030 -0.0003653267 -0.0011317755 -0.0000042593 0.0000027690 0.0000012916 -0.0000019582 0.0000000046 0.0000060398 -0.0000016169 -0.0000027005 -0.0000022206 -0.0000011081 -0.0000003251 -0.0000015436 -0.0000093591 -0.0000027980 0.0000065907 0.0000122306 -0.0000466152 -0.0000678123 0.0000252279 -0.0000117952 -0.0000218125 0.0000086036 -0.0000037185 -0.0000064776 0.0000046742 0.0000039350 0.0000268217 0.0001083016 0.0000281858 -0.0000863672 -0.0000510919 0.0000395677 0.0000828168 0.0000084394 0.0000213683 0.0000398992 -0.0000012125 0.0000024267 0.0000031054 -0.0000048542 -0.0000005965 0.0000019907 0.0000077268 -0.0000023149 0.0000006826 0.0000060753 -0.0000007424 -0.0000001870 -0.0000037003 0.0000014582 -0.0000008895 0.0000098767 0.0000001236 -0.0000016462 -0.0000050493 -0.0000629428 0.0000251740 -0.0000617238 -0.0000401003 0.0000238397 -0.0000066382 -0.0000266659 0.0000109495 0.0000203425 -0.0000075697 -0.0000004405 0.0000297206 0.0003154541 -0.0001306050 -0.0001604091 0.0001036214 -0.0000086080 -0.0000025078 -0.0000046279 -0.0000010523 0.0000004803 0.0000001800 0.0000004159 -0.0000002400 -0.0000080082 0.0000073165 -0.0000048177 -0.0000032605 -0.0000039061 0.0000143608 0.0001165174 -0.0000862792 0.0000433601 0.0000420083 0.0000253479 -0.0000045337 -0.0000210211 0.0000122150 0.0000027610 -0.0000010765 0.0000065425 0.0000488669 0.0002126779 -0.0001147610 -0.0000310555 0.0000052011 -0.0000610655 -0.0000001574 -0.0000152231 -0.0000165716 0.0000327399 0.0002127291 0.0002394347 0.0000271188 0.0000336579 -0.0000018219 -0.0000085333 -0.0000265760 -0.0000055554 -0.0007238903 -0.0015549261 -0.0011239324 0.0030378884 -0.0019827447 0.0044132052 0.0031571341 0.0037064809 -0.0031720547 0.0028915848 0.0165691333 0.0122997126 -0.0000001647 0.0000011932 -0.0000001682 0.0000001126 0.0000471887 -0.0000177157 -0.0000004579 -0.0000048892 0.0000018984 0.0000004433 -0.0000000861 -0.0000001110 -0.0000017129 0.0000009418 0.0000001537 -0.0000024687 0.0000010466 -0.0000046254 0.0000010903 0.0000009857 0.0000006016 -0.0000023611 -0.0000094298 0.0000057397 -0.0000004908 -0.0000005216 0.0000003111 0.0000263986 0.0001022716 -0.0000672336 0.0000036533 -0.0000019807 0.0000025784 0.0000005804 0.0000007036 0.0000017702 -0.0000045704 -0.0000000565 -0.0000006638 0.0000042377 0.0000021282 0.0000061417 0.0000032937 -0.0000002251 0.0000019500 -0.0000391716 0.0001313179 0.0000284283 -0.0000371832 0.0000628667 0.0000348818 0.0000015023 -0.0000104818 -0.0000037819 -0.0000073729 0.0000051161 0.0000059663 0.0000094128 0.0000055260 -0.0000034801 -0.0000006785 -0.0000098926 -0.0000019870 0.0000236437 0.0000089118 -0.0000153555 -0.0000011150 -0.0000036776 -0.0000022130 -0.0000993190 -0.0000253152 0.0000451062 0.0000460332 0.0001066997 -0.0000038309 -0.0002671245 -0.0000425035 0.0001493771 0.0000106372 -0.0000174125 -0.0000129852 -0.0000376147 0.0000145400 -0.0000072679 0.0001466931 0.0001321392 0.0000066370 0.0000177153 0.0000253240 0.0000357980 -0.0000389874 -0.0001211992 -0.0001052691 -0.0001144310 0.0000059366 0.0000043375 -0.0000335100 -0.0000028842 -0.0000484977 0.0000000825 -0.0000193664 -0.0000882208 0.0003657449 -0.0000347371 -0.0003234850 0.0006076357 0.0010259333 -0.0000315851 0.0001689335 0.0000121367 -0.0000310939 0.0002694177 0.0004207310 -0.0000206475 -0.0044544742 -0.0000599690 0.0021669708 -0.0005187715 0.0011942288 0.0006465419 0.0000345457 0.0000028540 -0.0000008607 -0.0005151737 -0.0000306835 -0.0000008324 0.0000000612 0.0000003396 -0.0000005159 -0.0000672514 0.0001563533 -0.0000460071 0.0000689477 -0.0003030071 0.0000738910 0.0001023454 -0.0000716904 0.0001918813 -0.0000066172 0.0000136672 -0.0000353982 -0.0000434531 0.0001994574 0.0005954961 -0.0006217195 0.0000353159 -0.0000597978 0.0001820373 0.0003371627 -0.0003354655 0.0002440035 -0.0003727251 0.0003645930 -0.0404967640 0.0460694137 -0.0741418618 0.0008765689 -0.0033711075 -0.0046981435 -0.0013960595 -0.0005678455 -0.0003883406 0.0010194941 0.0013930872 -0.0019733554 0.0020192641 -0.0030791894 0.0003141730 0.0053336512 0.0015729779 -0.0006757942 0.0002310791 0.0010424441 0.0012541678 0.0010681389 -0.0010020141 0.0000987636 -0.0027609355 -0.0013139903 -0.0001497311 -0.0008238353 -0.0018534561 0.0042429098 -0.1153056185 -0.5423673590 0.4344381656 0.1202100081 0.0007002626 -0.0586477247 0.4736983336 0.0007498024 0.5020713782 -0.0000017200 -0.0000004662 -0.0000001213 0.0000021836 0.0000006004 0.0000028606 -0.0000014048 0.0000018682 0.0000013153 0.0000036178 -0.0000015755 -0.0000000959 -0.0000005884 -0.0000027030 -0.0000025186 0.0000107647 0.0000025242 0.0000106004 0.0000022945 -0.0000109235 -0.0000178998 -0.0000114641 -0.0000032924 0.0000047218 -0.0000201308 -0.0000035789 -0.0000095002 -0.0000088313 0.0000203194 0.0000135121 -0.0001117556 -0.0000460930 -0.0001187669 -0.0000009519 -0.0000000183 0.0000006824 0.0000033141 0.0000007017 -0.0000010045 0.0000002428 0.0000000058 -0.0000004998 -0.0000006273 -0.0000003135 0.0000015531 0.0000014454 0.0000005023 0.0000004194 0.0000057136 -0.0000073572 -0.0000273021 -0.0000284009 -0.0000057439 0.0000028041 -0.0000008424 -0.0000018002 -0.0000054312 -0.0000084215 0.0000030295 -0.0000104200 -0.0000118484 0.0000021164 0.0000086201 0.0000046427 0.0000016363 0.0000026300 0.0000119536 0.0000051095 0.0000039139 0.0000008982 0.0000007867 0.0000034555 0.0000003821 -0.0000009063 0.0000018131 0.0000004853 0.0000000252 0.0000002454 0.0000000009 -0.0000000181 0.0000003092 -0.0000003052 -0.0000030283 0.0000014075 0.0000007699 0.0000000902 0.0000001386 0.0000010302 0.0000324049 -0.0000120599 -0.0000063224 -0.0000041359 0.0000037547 -0.0000005845 -0.0000177954 0.0000061877 0.0000014344 0.0000003404 -0.0000001045 -0.0000004525 0.0002028381 -0.0000614100 -0.0000041389 0.0000016504 0.0000001790 -0.0000002792 -0.0000001790 -0.0000007771 -0.0000000823 -0.0000000094 0.0000003631 -0.0000003014 -0.0000026208 0.0000015208 0.0000001262 0.0000008167 0.0000001780 0.0000055150 0.0000303412 -0.0000183460 -0.0000009362 -0.0000045095 -0.0000011165 -0.0000026845 -0.0000109561 0.0000056056 0.0000027502 -0.0000005407 0.0000054327 0.0000259735 0.0001196707 -0.0000662776 -0.0000254686 0.0000091345 -0.0000511346 -0.0000045977 0.0000270600 -0.0001706435 0.0000148214 0.0005675948 0.0007811952 -0.0001908418 0.0001697967 -0.0000252318 0.0002493274 -0.0010506849 0.0013184901 -0.0001967451 -0.0002542810 -0.0003833058 0.0015690664 -0.0009065635 0.0023058476 0.0003240936 0.0003408091 -0.0004510872 0.0006440235 0.0036357346 0.0026421317 -0.0000173962 -0.0000120706 0.0000058271 0.0000221083 0.0009279402 -0.0003497162 0.0000015674 -0.0000884810 0.0000324592 -0.0000305342 -0.0000028670 0.0000059922 0.0001475763 0.0000468340 -0.0000354773 0.0000502255 -0.0000201528 0.0000901334 -0.0000103920 -0.0000073181 -0.0000125525 0.0000167464 0.0000619264 -0.0000322597 -0.0000007570 0.0000061411 -0.0000069648 -0.0001675924 -0.0006409999 0.0003806347 -0.0001189298 0.0000434551 -0.0000253661 -0.0000719992 -0.0000825722 0.0000002799 0.0001197836 0.0000666772 -0.0001180992 -0.0000579425 0.0000626700 0.0000573118 0.0000041141 -0.0000268088 0.0000723376 -0.0005527664 -0.0034447595 -0.0003338369 -0.0005542646 0.0007852961 0.0005868597 -0.0000428935 -0.0001330014 -0.0000355446 -0.0000919278 -0.0000364557 0.0001546448 0.0000352588 0.0000597021 0.0000057129 0.0001851902 0.0000474447 -0.0000829633 -0.0004220078 -0.0000989991 0.0005488319 0.0002249004 0.0002362089 -0.0001141570 -0.0006835572 -0.0001063423 0.0002523558 -0.0007580817 -0.0015945965 -0.0000851288 0.0050693512 0.0012240547 -0.0029972122 0.0001805834 0.0003677760 0.0000522574 0.0000953897 0.0001281333 -0.0000163173 -0.0020013400 -0.0018189051 -0.0004163265 0.0000317354 0.0000598640 -0.0000092096 0.0000281844 -0.0000479908 -0.0000148044 0.0000114906 0.0000206008 0.0000022100 -0.0012752748 -0.0001428134 0.0004791284 0.0002160045 0.0002607249 -0.0000595149 -0.0000594862 -0.0000073713 0.0000237338 -0.0000610474 -0.0000938248 -0.0000050174 0.0128003997 0.0005016035 -0.0060151954 -0.0020781658 -0.0035143999 0.0005337904 0.0007299348 0.0000213700 -0.0002993709 -0.0003291230 0.0006930373 0.0002273241 0.0004248920 -0.0000876504 -0.0000298488 -0.0081789511 -0.0003298516 0.0004448198 0.0000149981 -0.0000135032 -0.0000045546 0.0003845536 -0.0003320625 -0.0000628683 0.0003325736 0.0001352246 0.0000916597 -0.0001793138 -0.0001601829 -0.0000046376 0.0000219955 0.0002484450 0.0001037948 0.0016086226 -0.0037622228 -0.0127837666 0.0060524445 0.0660064953 0.0366773383 -0.0003947614 0.0001067953 -0.0001154431 0.0000282760 -0.0000325119 -0.0000451387 -0.0002279327 0.0002049772 -0.0002432091 -0.0198228380 0.0718392006 0.1002330896 0.0244621402 0.0101169650 0.0071647479 -0.0229007088 -0.0361975664 0.0482478771 0.2422992028 -0.3455950210 0.0351239296 -0.1769323815 -0.0423044451 0.0265986728 -0.1390902250 -0.4081894402 -0.4978750331 0.0026010452 -0.0027151587 0.0005262435 0.0023735524 0.0013232544 0.0001905803 0.0004409184 0.0002083030 -0.0018434038 -0.0004398343 -0.0022406554 0.0017441747 0.0014236932 -0.0000838625 -0.0006528780 0.0017704926 -0.0000349723 0.0017671050 0.0000276867 0.0000339961 -0.0000273287 -0.0000175787 0.0000141451 0.0000159530 -0.0000503239 -0.0000020414 -0.0000218617 0.0000918881 0.0001386123 -0.0000548596 -0.0000271958 0.0000030790 -0.0001485121 0.0000223754 0.0000123063 0.0000162351 0.0001334323 -0.0001391799 -0.0003569141 0.0004221808 0.0001483064 0.0003561428 0.0000490394 0.0000172946 -0.0001124851 -0.0002180300 0.0003911515 0.0006648561 -0.0001835083 -0.0000942187 -0.0001760203 0.0000228754 0.0000311692 0.0000654635 -0.0001937213 -0.0000374993 0.0001162312 0.0000311868 0.0000365692 0.0000023061 -0.0000103000 -0.0000071302 0.0000063293 0.0000305592 0.0000156907 -0.0000137870 -0.0000640114 -0.0001991290 -0.0005307294 0.0017518475 0.0005368285 -0.0017182542 -0.0002005792 0.0000023787 0.0000516406 -0.0000483345 -0.0000280412 -0.0000480589 -0.0002887117 -0.0001093501 0.0002569275 -0.0000136071 0.0000087414 0.0000274499 0.0000138096 0.0000013297 0.0000243321 0.0000328373 -0.0000026201 -0.0000077575 0.0000889006 0.0000510259 -0.0000121013 -0.0000054901 -0.0000010917 0.0000018731 0.0000074484 0.0000076086 -0.0000052900 0.0000012967 -0.0000534134 0.0000216608 -0.0000118493 -0.0000025422 0.0000031415 0.0000250295 0.0006267301 -0.0002459208 0.0000597978 0.0000266878 -0.0000137650 -0.0000025028 0.0000000036 0.0000005868 -0.0000235641 0.0000163455 -0.0000018080 0.0000092187 -0.0000250956 0.0000150846 0.0002566616 -0.0001760050 0.0000214741 0.0000039993 -0.0000017760 0.0000088311 -0.0000030072 -0.0000002993 -0.0000053937 -0.0000025080 -0.0000102806 0.0000020966 -0.0000209121 -0.0000245370 -0.0000151964 0.0000249818 0.0001096010 -0.0000305500 0.0002175818 0.0002567297 0.0001606904 0.0000093861 0.0000374949 -0.0000176786 -0.0000082415 0.0000011675 -0.0000149901 -0.0000913847 -0.0004312757 0.0002289361 0.0000508662 -0.0000284826 0.0001097956 -0.0013659215 0.0015755372 0.0011885742 -0.0017019293 -0.0110964733 -0.0140389997 0.0155345379 -0.0087430537 -0.0026889787 -0.0001373224 -0.0000969449 0.0011228316 0.0211425978 0.0471038646 0.0130923086 -0.0218760656 0.0196175898 -0.0347774388 -0.1728592819 -0.2038642818 0.1594915440 -0.0632292597 -0.3745332121 -0.2818159867 -0.0000062178 0.0000048174 -0.0000017457 -0.0000142697 -0.0001085249 0.0000529915 0.0000003991 0.0000075669 -0.0000022041 0.0000012286 0.0000022756 -0.0000027595 -0.0000109080 -0.0000059647 0.0000015943 0.0000395956 -0.0000130007 0.0000633678 -0.0000080830 -0.0000002587 -0.0000103978 0.0000101702 0.0000382508 -0.0000184440 0.0000021469 0.0000061659 -0.0000046210 -0.0000989200 -0.0004035293 0.0002501199 -0.0000780674 0.0000061834 -0.0000171587 -0.0001026177 -0.0000631375 -0.0000129136 0.0002132233 0.0001081009 -0.0000843742 0.0000470453 -0.0001724993 -0.0001031384 -0.0000659979 -0.0000437029 0.0000642291 0.0009550017 0.0047366350 -0.0001165014 0.0005942510 -0.0009340149 -0.0006662593 -0.0002118051 -0.0000424601 0.0000894119 -0.0000847612 0.0000246244 0.0001691627 0.0000987719 0.0002476856 0.0000160192 0.0002346550 0.0000019013 -0.0001265757 -0.0003603157 -0.0000930740 0.0006055295 0.0000247733 -0.0003718733 -0.0002419061 -0.0014319308 -0.0003241148 0.0006893174 -0.0004062669 -0.0008967003 -0.0000142338 0.0046061757 0.0012043556 -0.0027058593 -0.0001641482 -0.0002791179 -0.0000967621 0.0001612134 0.0002763043 0.0001900169 -0.0031091652 -0.0030353575 -0.0009069952 -0.0000020718 -0.0000922732 -0.0000464398 -0.0000012097 0.0000370377 0.0000062101 -0.0000383971 -0.0000220179 0.0000101737 0.0008953448 0.0000964702 -0.0003335701 -0.0001738952 -0.0001909076 0.0000509913 -0.0000439455 -0.0000056382 0.0000215223 0.0002524941 0.0004462650 -0.0000897939 -0.0090050065 -0.0004920202 0.0042044526 0.0014693394 0.0025353241 -0.0003507017 0.0005196759 0.0000052860 -0.0002188804 0.0000925118 -0.0002446080 -0.0000727251 -0.0000817245 0.0001091634 0.0001103383 0.0025617855 0.0003040526 -0.0007975473 0.0000174480 -0.0000071535 -0.0000019413 0.0004541469 -0.0005252565 -0.0002223491 0.0006071401 0.0004162164 0.0001743624 -0.0002821948 -0.0000628434 0.0000521649 -0.0000077201 -0.0003711694 -0.0001164427 0.0012016954 -0.0033008571 -0.0107817464 -0.0073240878 -0.0468345531 -0.0272169441 0.0002936833 -0.0001273334 0.0001622151 0.0000511818 -0.0000675264 -0.0000782479 -0.0002206137 0.0002095303 -0.0001676351 -0.0174125217 0.0621143536 0.0859755875 0.0226799152 0.0091008936 0.0070649191 -0.0183601384 -0.0285333194 0.0382425855 -0.1600011687 0.2275822645 -0.0238336357 0.1478383888 0.0370508170 -0.0217173338 0.1021630368 0.3045953512 0.3684023403 -0.0032691512 0.0037195888 -0.0004730813 -0.0012570169 -0.0007888292 -0.0000500205 -0.0000992090 0.0000586685 0.0003934145 -0.0004362703 -0.0022108972 0.0016513303 0.0018220054 -0.0001146083 -0.0008455629 0.0012740505 -0.0000845167 0.0012094604 -0.0000307180 -0.0000189134 0.0000195772 -0.0000146393 0.0000824389 0.0000850948 0.0000349216 0.0000017438 0.0000138334 -0.0000533664 -0.0000996613 0.0000345075 0.0000142004 0.0000036175 0.0001097092 -0.0000180068 -0.0000178452 -0.0000199488 0.0002327837 -0.0007771241 -0.0007521244 -0.0003234422 -0.0000690392 -0.0002111639 -0.0000643535 -0.0000072511 0.0000801751 0.0001825417 -0.0004104863 -0.0005712006 0.0001822121 0.0000927330 0.0002144918 0.0000162961 0.0000070432 -0.0000141893 -0.0002845634 -0.0000488597 0.0001983370 0.0000288774 0.0000412925 -0.0000029028 -0.0000084866 -0.0000102555 -0.0000042061 0.0000269843 0.0000136439 -0.0000105633 0.0000002177 0.0001520034 0.0003546208 0.0027586525 0.0008076791 -0.0026372442 -0.0002333024 0.0000174478 0.0000869196 -0.0000171734 -0.0000124532 0.0000873501 -0.0002516656 -0.0000802511 0.0002452890 0.0000201648 -0.0000090373 -0.0000264527 0.0000049386 0.0000026889 -0.0000154892 0.0000341580 -0.0000085244 -0.0000252551 0.0001030861 0.0000658836 -0.0000176183 0.0000008236 -0.0000003042 0.0000003925 0.0000027680 -0.0000000686 0.0000018972 -0.0000001712 0.0000083088 -0.0000033373 -0.0000010676 -0.0000015974 0.0000010904 -0.0000068665 -0.0000928141 0.0000471019 0.0000186835 0.0000165292 -0.0000011057 -0.0000009697 -0.0000047819 0.0000014268 -0.0000069461 0.0000057904 -0.0000007774 0.0000086714 0.0000688919 -0.0000172906 0.0000877361 -0.0000501778 0.0000092206 0.0000004882 -0.0000037755 0.0000041310 -0.0000018232 -0.0000004908 -0.0000040949 -0.0000018139 -0.0000134270 0.0000052924 -0.0000090715 -0.0000097058 -0.0000079871 0.0000192104 0.0001583074 -0.0000708309 0.0000810314 0.0001037565 0.0000635641 0.0000069941 0.0000273086 -0.0000131430 -0.0000032898 -0.0000014582 -0.0000050356 -0.0000652124 -0.0003180297 0.0001725677 0.0000036322 -0.0000034135 0.0000170389 -0.0013846590 0.0016055214 0.0013222374 -0.0020088379 -0.0122948767 -0.0153538814 0.0148035075 -0.0087333381 -0.0027855006 -0.0002721232 0.0004746481 0.0004894130 0.0304681570 0.0671657535 0.0123095589 -0.0140526462 0.0187015511 -0.0251907508 -0.2738549676 -0.3234604168 0.2508085577 -0.0835973398 -0.4948664485 -0.3732685614 0.0009185660 0.0002193351 -0.0001548924 0.0111256983 0.1434478797 -0.0562146113 -0.0011016452 -0.0126613077 0.0049293838 -0.0000416750 0.0000868685 -0.0000217200 -0.0000656514 0.0000112940 -0.0000005539 -0.0000069191 -0.0000064784 -0.0000083203 0.0000324484 -0.0000076797 0.0000040959 0.0000053187 0.0000137059 -0.0000057596 -0.0000015274 0.0000016398 -0.0000003775 -0.0000380885 -0.0001088924 0.0000468052 0.0000021119 0.0000076166 0.0000020612 0.0000605853 0.0000189595 -0.0000097753 -0.0000139581 -0.0000166114 -0.0000056181 0.0000097611 0.0000065021 -0.0000035776 0.0000071366 0.0000022692 0.0000109360 0.0000004114 0.0000090168 -0.0000098279 0.0000287026 -0.0000464017 -0.0000368775 -0.0000021895 0.0000029053 0.0000028587 -0.0000006136 -0.0000007927 0.0000002463 0.0000120840 0.0000026437 -0.0000054920 -0.0000030576 -0.0000068579 -0.0000003515 -0.0000007641 0.0000003121 0.0000008453 -0.0000005584 0.0000009048 -0.0000003089 -0.0001399786 -0.0000342509 0.0000602376 0.0000375480 0.0000762879 0.0000037491 0.0000067191 0.0000028640 -0.0000051421 -0.0000003097 -0.0000008686 0.0000004486 -0.0000013517 0.0000001148 -0.0000009181 0.0000084167 0.0000067099 0.0000006639 0.0000002663 -0.0000002131 0.0000001071 0.0000020116 -0.0000050253 -0.0000015538 -0.0000037705 -0.0000064500 0.0000006070 -0.0000003285 0.0000001005 0.0000004238 0.0000004757 0.0000005033 -0.0000000556 0.0000062854 0.0000005875 -0.0000024054 0.0000421325 0.0000709060 -0.0000067275 0.0000007912 0.0000033029 -0.0000055199 -0.0000069814 -0.0000057416 0.0000016528 -0.0000710602 -0.0000016167 0.0000286425 -0.0000260562 0.0000529367 0.0000184080 0.0000310413 0.0000013789 0.0000000025 -0.0005035544 -0.0000143523 -0.0000081648 -0.0000020535 -0.0000016997 -0.0000025719 0.0000000371 0.0000006896 0.0000008519 -0.0000039027 -0.0000025194 0.0000004831 0.0000040570 0.0000017393 -0.0000003422 -0.0000029588 0.0000007341 0.0000017744 -0.0000028462 -0.0000196799 -0.0000308573 0.0000032692 0.0000294955 0.0000130715 -0.0000037785 -0.0000000136 -0.0000014326 0.0000012403 -0.0000005148 -0.0000010444 0.0000202498 0.0000091445 -0.0000106818 -0.0000679834 0.0001905476 0.0002998334 0.0001286193 0.0000548266 0.0000547284 -0.0000112301 -0.0000206664 0.0000231375 0.0001487740 -0.0001994309 0.0000179418 -0.0001110130 0.0000086167 0.0000127399 -0.0000693406 -0.0001569826 -0.0002024253 0.0000290049 -0.0000313379 0.0000077047 0.0000258901 0.0000185459 0.0000068192 0.0000013098 0.0000037636 -0.0000100817 -0.0000205109 -0.0001097849 0.0000869214 -0.0001931741 0.0000057626 0.0000786923 -0.0000295537 -0.0000008562 -0.0000326822 -0.0000308649 -0.0000021766 0.0000046152 -0.0000182121 -0.0000009516 -0.0000115995 0.0000026759 -0.0000046468 -0.0000027890 0.0000063728 0.0000003561 0.0000043308 -0.0000052918 -0.0000075116 -0.0000135991 0.0000715129 0.0000435051 0.0000844626 -0.0000297497 0.0001237941 0.0000718020 -0.0000100941 0.0000019386 -0.0000059983 -0.0000058847 0.0000025073 0.0000005281 -0.0000464945 0.0001575152 0.0001421540 -0.0009960872 -0.0003997959 -0.0009258070 0.0000023604 0.0000045235 0.0000096054 0.0000000846 -0.0000006744 -0.0000022236 0.0000023512 0.0000015077 0.0000009178 -0.0000015784 -0.0000008495 -0.0000004797 0.0000051086 0.0000024584 -0.0000024523 -0.0000130043 -0.0000389751 -0.0000990301 -0.0000130998 -0.0000033341 0.0000141381 -0.0000040588 -0.0000025127 -0.0000022344 0.0000029889 0.0000023290 0.0000036086 -0.0000424328 -0.0000225572 0.0000324176 0.0000018844 -0.0000016146 -0.0000009546 0.0000020537 -0.0000004555 0.0000008068 0.0000010128 0.0000013695 0.0000014929 0.0000017761 0.0000005952 -0.0000000382 -0.0029177630 -0.0001807766 0.0005127757 0.0002644759 -0.0003358748 0.0000776596 0.0030328116 0.0668529572 -0.0270170561 -0.0326805585 -0.0163890206 0.0118045271 -0.0285240521 -0.7723633325 0.3117014410 0.4069756223 0.1777458548 -0.1370213070 -0.0002262010 0.0056738289 -0.0020477920 0.0162954262 -0.0100143679 0.0007689152 -0.0027672655 -0.0711927437 0.0271335907 -0.1908070881 0.1261002233 -0.0122701846 0.0000300148 0.0000046486 -0.0000155452 0.0000119455 -0.0000073746 0.0000198739 0.0000114585 0.0000370177 -0.0000359708 -0.0001656497 -0.0001929755 -0.0001169453 -0.0000720249 -0.0004719924 0.0003010274 0.0019703645 0.0022540170 0.0013744679 0.0000876023 0.0004775183 -0.0002606009 0.0001437394 -0.0000661080 0.0002770513 -0.0011013650 -0.0055369769 0.0029174004 -0.0017919972 0.0007793878 -0.0033981111 -0.0000010007 0.0000003704 0.0000005198 -0.0000021701 -0.0000018517 -0.0000017138 0.0000163408 -0.0000073387 -0.0000036630 -0.0000019071 0.0000019572 -0.0000024288 0.0000059658 0.0000143239 -0.0000080893 0.0000367592 -0.0000225428 0.0000533854 -0.0001058825 -0.0001076662 0.0000840526 -0.0000080491 -0.0000448472 -0.0000376995 0.0000132500 0.0000026259 -0.0000041702 0.0001546727 0.0022750666 -0.0008840347 -0.0000158525 -0.0002043613 0.0000787127 0.0000156700 0.0000165464 0.0000136702 -0.0000126502 0.0000040897 0.0000018079 -0.0000636229 -0.0000922332 -0.0000013901 -0.0000251651 -0.0000867822 0.0000167818 0.0037278825 0.0170173703 -0.0108042132 0.0007422375 -0.0000206071 0.0010348170 -0.0445392588 -0.1938508953 0.1211620492 0.0000341939 0.0000054610 0.0000297510 0.0000051968 -0.0000051931 -0.0000005031 -0.0000134598 0.0000067936 -0.0000026052 0.0000107058 -0.0000001039 -0.0000050114 0.0000045385 -0.0000030779 0.0000050651 0.0000054889 0.0000191025 -0.0000013758 -0.0000248562 0.0000382357 0.0000257528 0.0000017021 -0.0000045360 -0.0000023617 -0.0000011898 -0.0000001954 0.0000008622 0.0000043738 0.0000015364 -0.0000017345 0.0000029718 0.0000051449 0.0000003193 0.0000013033 0.0000004862 -0.0000004297 -0.0000003003 0.0000001191 -0.0000004659 -0.0000512510 -0.0000137781 0.0000185971 -0.0000319223 -0.0000590179 -0.0000075357 -0.0000120906 -0.0000021494 0.0000071405 0.0000009965 -0.0000013842 -0.0000012235 -0.0000005639 0.0000006291 0.0000024790 -0.0000107563 -0.0000101747 -0.0000037248 -0.0000000085 -0.0000004935 -0.0000002315 -0.0000000974 0.0000003906 0.0000000641 0.0000006404 0.0000012514 -0.0000000612 0.0000047251 0.0000004847 -0.0000021099 -0.0000021756 -0.0000038067 0.0000004322 0.0000016027 -0.0000000353 -0.0000007083 -0.0000088027 -0.0000133105 0.0000014232 -0.0000557700 -0.0000036816 0.0000247997 0.0000240460 0.0000439248 -0.0000052148 -0.0000179476 -0.0000004919 0.0000079233 0.0000022766 -0.0000053447 -0.0000015199 0.0000190717 0.0000009255 -0.0000003303 -0.0003045216 -0.0000057395 0.0000026978 0.0000190212 0.0000280036 -0.0000549047 -0.0000003505 -0.0000008635 -0.0000020091 -0.0000004320 0.0000029030 0.0000026773 -0.0000007404 -0.0000007985 -0.0000009053 -0.0000000660 -0.0000002427 0.0000020432 -0.0000032264 -0.0000120988 -0.0000165769 0.0000072590 0.0000053920 0.0000004823 0.0000005679 -0.0000038772 0.0000029973 0.0000012120 -0.0000008471 -0.0000013274 0.0000165360 0.0000028849 -0.0000008203 -0.0000446679 0.0001063032 0.0001821002 0.0000540816 0.0000162847 0.0000404674 0.0000267754 0.0000184927 -0.0000227766 0.0000144340 -0.0000199396 -0.0000023384 -0.0000877574 -0.0000133122 0.0000175362 -0.0000191692 -0.0000227576 -0.0000362109 -0.0000267134 0.0000273660 -0.0000063465 0.0000078524 0.0000017529 0.0000039755 0.0000130921 0.0000165752 -0.0000471426 -0.0000039970 -0.0000318720 0.0000234402 -0.0001347264 0.0000024191 0.0000552734 -0.0000571021 -0.0000012269 -0.0000632287 -0.0000032774 -0.0000001873 -0.0000002249 -0.0000018152 0.0000075537 0.0000077598 -0.0000014218 -0.0000004441 -0.0000012374 0.0000016587 -0.0000006978 -0.0000000684 -0.0000009528 0.0000001408 -0.0000007096 0.0000039459 0.0000008391 0.0000030295 0.0000247206 -0.0000777573 -0.0000848362 0.0000119951 0.0000068991 0.0000121979 -0.0000028450 0.0000009039 0.0000004093 0.0000023565 -0.0000007958 0.0000003363 -0.0000314474 -0.0000116053 -0.0000264999 0.0000423890 0.0001872735 0.0006056577 0.0000327197 -0.0000072044 -0.0000652079 -0.0000021695 0.0000049913 0.0000116806 0.0000161173 0.0000072582 -0.0000044815 -0.0000084828 -0.0000263309 -0.0000486951 -0.0006283379 -0.0023317081 -0.0067377760 -0.0007402986 -0.0001993490 0.0006672520 -0.0000052180 -0.0000015608 -0.0000021665 -0.0000238617 -0.0000041069 -0.0000345065 -0.0003205165 -0.0000922669 0.0003162846 0.0000009238 -0.0000006285 -0.0000007156 0.0000010191 -0.0000000524 0.0000001693 0.0000018349 0.0000012062 0.0000020583 0.0000024965 0.0000011114 0.0000007442 -0.0000224353 0.0000067122 0.0000031634 0.0000213878 -0.0000042020 0.0000351357 0.0000164644 0.0005371173 -0.0002178326 -0.0002550091 -0.0001418614 0.0000957048 -0.0002308124 -0.0062178300 0.0025091417 0.0031854351 0.0013931252 -0.0010713196 -0.0000173652 0.0000129130 0.0000154867 0.0000450628 -0.0000090870 -0.0000034715 0.0000370814 -0.0001685805 0.0000343836 -0.0004693084 0.0003031252 -0.0000154283 0.0001761881 0.0002693206 0.0000627379 -0.0018351316 -0.0005274899 -0.0023037886 -0.0010715840 -0.0043427149 0.0015915975 0.0131430511 0.0142693587 0.0098522698 0.0098491777 0.0549674345 -0.0269633954 -0.1548685718 -0.1767821508 -0.1091843366 -0.0112496932 -0.0587598056 0.0316127712 -0.0183461311 0.0098052101 -0.0362777546 0.1356630252 0.6829650784 -0.3597367999 0.2301171746 -0.0998382493 0.4361243865 -0.0000027693 0.0000016349 0.0000020136 -0.0000020388 -0.0000100649 -0.0000123536 0.0000374165 -0.0000193838 -0.0000050813 -0.0000014790 0.0000057167 -0.0000051313 0.0000110882 0.0000226237 -0.0000026564 0.0000187669 -0.0000019845 0.0000290492 -0.0001320922 -0.0001343253 0.0001140448 -0.0000301115 -0.0001320157 -0.0001020872 0.0003411335 0.0000961968 -0.0000699828 0.0042305509 0.0704610221 -0.0274479124 -0.0004658624 -0.0062000072 0.0024148516 0.0000004501 0.0000070855 0.0000105049 0.0000169322 0.0000763864 -0.0000211562 0.0001541595 0.0006967518 -0.0004010265 0.0000243106 0.0000579231 -0.0000846787 -0.0158827042 -0.0704020848 0.0441191841 -0.0025154963 0.0002039212 -0.0036000439 0.1911509328 0.8044208583 -0.4940838125 0.0001106456 -0.0001251307 0.0001484650 -0.0000096901 -0.0000370832 -0.0000053272 -0.0000584127 0.0000386931 0.0000076694 0.0000368813 0.0000033578 -0.0000159553 0.0000233261 -0.0000130489 0.0000133625 0.0000284920 0.0000585716 -0.0000086919 0.0002640828 -0.0004230429 -0.0002971251 -0.0000252383 0.0000336986 0.0000262158 -0.0000015929 -0.0000025679 0.0000003820 0.0000313392 0.0000073191 -0.0000163110 0.0000083728 0.0000148078 -0.0000009846 0.0000098293 0.0000021027 -0.0000059311 -0.0000035427 -0.0000049187 -0.0000010518 -0.0003981599 -0.0001028081 0.0001849298 -0.0000618049 -0.0001437661 -0.0000052691 -0.0000980641 -0.0000271218 0.0000593960 -0.0000008395 -0.0000038125 -0.0000010138 0.0000043851 0.0000051014 0.0000054380 -0.0000660834 -0.0000775149 -0.0000091640 -0.0000005842 -0.0000004479 -0.0000005000 0.0000015123 -0.0000014205 -0.0000009139 0.0000134039 0.0000225799 -0.0000022259 -0.0000030382 0.0000006808 0.0000015764 -0.0000046889 -0.0000090461 0.0000009594 -0.0000089774 -0.0000007360 0.0000035502 -0.0001482660 -0.0002539246 0.0000237096 0.0000239687 -0.0000104204 -0.0000119220 0.0000469920 0.0000926025 -0.0000085250 0.0001125256 0.0000024408 -0.0000459049 -0.0000142557 0.0000253222 0.0000094456 0.0000845311 0.0000090826 -0.0000017372 -0.0013368502 -0.0000579777 0.0000188400 -0.0001676655 -0.0002420317 0.0002736890 0.0000005985 0.0000002648 -0.0000030089 -0.0000023682 0.0000010450 0.0000020100 0.0000021518 0.0000026547 -0.0000012755 -0.0000014520 -0.0000052304 0.0000039559 -0.0000147614 -0.0001161718 -0.0001852868 0.0000236804 0.0000180363 0.0000050871 -0.0000021099 -0.0000063750 0.0000076964 0.0000003666 0.0000004329 -0.0000002543 0.0000800761 0.0000129174 -0.0000217534 -0.0004250135 0.0013467262 0.0020503725 0.0005024702 0.0001727099 0.0002255546 0.0000707611 -0.0000560074 -0.0000006743 0.0000132988 -0.0000232917 -0.0000167915 -0.0002491416 -0.0000465709 0.0000461016 -0.0000689560 -0.0000947854 -0.0001329615 -0.0000509615 0.0000573350 -0.0000055692 0.0000426967 0.0000214613 0.0000114460 0.0000289413 0.0000373411 -0.0001192608 -0.0000297471 -0.0001872710 0.0001518538 -0.0007385327 0.0000199788 0.0003010421 -0.0001762775 0.0000013818 -0.0001967953 -0.0000138268 -0.0000160705 0.0000010223 -0.0000143641 0.0000129333 0.0000055663 -0.0000035521 -0.0000043856 -0.0000075691 0.0000045794 -0.0000003985 0.0000020378 -0.0000037239 -0.0000075615 -0.0000126842 0.0000870376 0.0000444682 0.0000917361 0.0000236379 -0.0000582265 -0.0000818349 0.0000488430 0.0000240026 0.0000584971 -0.0000099612 0.0000018644 0.0000003783 -0.0000515391 0.0001387848 0.0001406507 -0.0010867763 -0.0004447726 -0.0010335013 -0.0001964718 -0.0009260771 -0.0030382391 -0.0001583795 0.0000220372 0.0002907523 0.0000306022 -0.0000088584 -0.0000375262 -0.0000835039 -0.0000162604 0.0000573463 0.0000939813 0.0001402370 0.0001992366 0.0031352452 0.0117188717 0.0341187124 0.0036145122 0.0009295895 -0.0031437470 0.0000020604 -0.0000057477 0.0000056165 0.0000976967 -0.0001522475 -0.0003146749 0.0009832143 0.0001148178 -0.0011040956 0.0000033887 -0.0000012613 -0.0000016167 0.0000044430 0.0000005519 0.0000010549 -0.0000037037 -0.0000010618 -0.0000051182 -0.0000014210 -0.0000009984 -0.0000079728 -0.0002131475 0.0001061099 -0.0000100136 0.0000112853 0.0000317594 -0.0000092977 -0.0000438354 -0.0004975212 0.0002044254 0.0004715036 0.0001914595 -0.0001535569 0.0004334093 0.0058041315 -0.0023808092 -0.0053932933 -0.0023687806 0.0018181163 -0.0000162125 -0.0002490319 0.0001088222 -0.0004194438 0.0002908518 -0.0000296709 0.0001846192 0.0029281070 -0.0012091462 0.0050321448 -0.0033347484 0.0003164610 -0.0000100794 0.0004697234 -0.0003237684 0.0019263242 0.0016020012 0.0012586348 -0.0003324837 -0.0017549992 0.0007950418 0.0048757083 0.0054451708 0.0035404775 0.0035619337 0.0211615581 -0.0107297431 -0.0573653812 -0.0653391969 -0.0404664611 -0.0020339235 -0.0116094919 0.0065414238 -0.0059016327 0.0025713403 -0.0112282207 0.0252912543 0.1366169269 -0.0744629667 0.0689637736 -0.0300377936 0.1307691534 0.0000038618 -0.0000082637 0.0000019827 0.0000080209 0.0000227258 0.0000368322 -0.0000453232 0.0000240675 0.0000073811 -0.0000045809 0.0000507137 -0.0000726198 0.0000343714 0.0000316747 0.0000012812 -0.0001371756 0.0000528611 -0.0001787835 -0.0003314845 -0.0003064588 0.0002505333 -0.0000071880 -0.0001398807 -0.0000807843 -0.0044274847 -0.0012508877 0.0008356763 -0.0547085458 -0.9113198084 0.3550249219 0.0060184535 0.0801465886 -0.0312222790 -0.0000550884 -0.0000893650 0.0000561446 -0.0000291415 -0.0007601925 0.0003480403 0.0000306184 0.0000422231 -0.0000219396 0.0000069539 0.0000047381 -0.0000304439 -0.0012198255 -0.0054050478 0.0033859029 -0.0001968163 0.0000161294 -0.0002730352 0.0146800313 0.0617803912 -0.0379440589 -0.0000050016 0.0000089494 0.0000119799 0.0001522623 0.0001657872 -0.0000313452 -0.0000309554 -0.0000471999 -0.0000330430 0.0000270047 0.0000201246 -0.0000030421 0.0000166303 0.0000055413 0.0000302250 -0.0000180472 -0.0000055019 -0.0000161969 0.0000596302 -0.0000986367 -0.0000766772 -0.0000048997 0.0000062820 0.0000061237 -0.0000024367 -0.0000018539 0.0000011838 0.0000244060 0.0000044740 -0.0000113701 -0.0000046892 -0.0000113635 -0.0000007604 0.0000012704 0.0000013496 0.0000000702 -0.0000000831 0.0000045153 -0.0000006971 -0.0002841950 -0.0000674145 0.0001210009 0.0000594088 0.0001252909 0.0000054040 -0.0000166035 -0.0000020844 0.0000069313 0.0000014113 0.0000002873 0.0000004061 -0.0000037435 -0.0000009009 -0.0000017907 0.0000257337 0.0000276952 0.0000033102 0.0000005522 -0.0000003491 0.0000000706 0.0000017319 -0.0000059709 -0.0000016264 -0.0000095015 -0.0000160703 0.0000015141 0.0000060778 -0.0000005085 -0.0000024440 0.0000057841 0.0000104733 -0.0000012279 0.0000076917 0.0000009286 -0.0000030354 0.0001035420 0.0001774396 -0.0000168970 -0.0000695141 0.0000091165 0.0000216259 -0.0000601253 -0.0001057139 0.0000110780 -0.0000921958 -0.0000023785 0.0000369438 -0.0000269534 0.0000592643 0.0000193862 0.0000647737 0.0000002870 0.0000003755 -0.0010609977 -0.0000022923 -0.0000323712 -0.0000152853 -0.0000221495 0.0000202836 0.0000000017 0.0000016779 0.0000013669 -0.0000056281 -0.0000025390 0.0000014396 0.0000059566 0.0000015648 -0.0000005993 -0.0000056498 0.0000023238 0.0000032806 -0.0000068258 -0.0000533568 -0.0000874357 0.0000365633 0.0000712381 0.0000288260 -0.0000075156 0.0000008323 -0.0000033911 0.0000016648 -0.0000013818 -0.0000016266 0.0001088147 0.0000344817 -0.0000470415 -0.0001889779 0.0005512199 0.0008639862 0.0003294102 0.0001345255 0.0001375284 -0.0000295278 -0.0000724224 0.0000776052 0.0003308532 -0.0004152544 0.0000280752 -0.0006126935 -0.0000655292 0.0001072566 -0.0001715838 -0.0003686643 -0.0004786169 0.0000654735 -0.0000648476 0.0000124279 0.0000455919 0.0000380147 0.0000094371 -0.0000005878 -0.0000006701 -0.0000049824 -0.0000753165 -0.0004329896 0.0003482180 -0.0010375883 0.0000302559 0.0004192551 -0.0001768610 0.0000028738 -0.0002041578 0.0001120872 0.0002331064 -0.0000452085 0.0001190087 0.0001401185 0.0002542733 -0.0000218014 0.0000332685 0.0000372021 0.0000047215 -0.0000175490 -0.0000266912 0.0000269235 0.0000882356 0.0001344597 -0.0010374389 -0.0005751039 -0.0011342785 0.0007482917 -0.0024349001 -0.0024585355 0.0000545689 -0.0000052072 -0.0000625389 -0.0000023955 0.0000053014 -0.0000005220 0.0006343189 -0.0016991761 -0.0016922200 0.0133612581 0.0055771762 0.0127698892 -0.0000125543 -0.0000675690 -0.0002273584 -0.0000140216 0.0000006141 0.0000207229 0.0000058661 0.0000014794 -0.0000014622 -0.0000084967 -0.0000017650 0.0000053728 0.0000147259 0.0000141844 0.0000114894 0.0002316618 0.0008737512 0.0025653139 0.0002807439 0.0000716417 -0.0002409457 -0.0000068346 -0.0000044570 -0.0000030144 0.0000068839 -0.0000172326 -0.0000413753 0.0000048942 -0.0000245308 -0.0000325191 -0.0000017539 -0.0000030530 -0.0000026307 -0.0000012990 -0.0000013272 0.0000004625 0.0000014897 0.0000019362 0.0000019902 0.0000030080 0.0000007937 -0.0000007017 0.0027112430 -0.0013001284 0.0001438938 -0.0001336600 -0.0004938637 0.0002088253 0.0006507046 0.0084001365 -0.0034427994 -0.0076066513 -0.0032808021 0.0025416856 -0.0065192769 -0.0981589811 0.0401442270 0.0877415591 0.0384318849 -0.0295812228 0.0000909278 0.0019908818 -0.0007482603 0.0047466344 -0.0031130622 0.0002964357 -0.0012725398 -0.0234335278 0.0089832933 -0.0560420499 0.0369369392 -0.0035560655 -0.0000003927 0.0000413680 -0.0000301673 0.0001480394 0.0001171419 0.0000956045 -0.0000131473 -0.0000872360 0.0000236715 0.0003350258 0.0003629355 0.0002468003 0.0001509278 0.0010507592 -0.0004111488 -0.0038990233 -0.0044169858 -0.0027445742 -0.0001730234 -0.0009781899 0.0005486891 -0.0005012639 0.0002267115 -0.0009597607 0.0021456589 0.0115272817 -0.0062669169 0.0058738851 -0.0025512823 0.0111416623 -0.0000029617 0.0000021491 0.0000011718 -0.0000049911 -0.0000101038 -0.0000132780 0.0000435674 -0.0000194117 -0.0000085544 -0.0000020970 -0.0000023523 0.0000047788 0.0000185224 0.0000369524 -0.0000155760 0.0000571599 -0.0000354417 0.0000863276 -0.0002789302 -0.0002763447 0.0002192837 -0.0000243923 -0.0001387484 -0.0001101449 -0.0000066018 -0.0000031707 0.0000015626 -0.0000654977 -0.0010826834 0.0004203033 0.0000079463 0.0000954442 -0.0000370557 -0.0000027928 0.0000002040 0.0000001164 0.0000123496 0.0000047079 -0.0000027583 0.0000024902 -0.0000005342 0.0000029617 -0.0000006577 0.0000001468 -0.0000008454 -0.0000153263 -0.0000673400 0.0000429772 -0.0000028685 0.0000004121 -0.0000042620 0.0001860233 0.0007656552 -0.0004748916 -0.0000059788 0.0000032139 -0.0000005552 -0.0000107393 -0.0000022040 0.0000052869 0.0000080056 -0.0000008196 -0.0000067450 -0.0000086123 0.0000036154 0.0000119894 -0.0000020389 -0.0000009346 0.0000055224 -0.0002740318 -0.0002223370 -0.0000226803 0.0000136845 -0.0000229111 -0.0000194661 0.0000012893 0.0000066176 0.0000018045 0.0000118355 -0.0000155287 -0.0000122042 -0.0000009414 -0.0000043665 -0.0000005471 -0.0000021575 0.0000055191 0.0000040838 0.0000247771 0.0000043108 -0.0000144424 -0.0000071946 -0.0000007211 0.0000040613 0.0000226233 0.0000043939 -0.0000183438 -0.0000203311 -0.0000354463 -0.0000028197 -0.0002711490 -0.0000727463 0.0001406646 -0.0000183366 0.0000070277 0.0000424376 -0.0000976570 -0.0000558605 -0.0000965224 0.0013117261 0.0014058505 0.0003174260 -0.0000179801 -0.0000361084 -0.0000081164 -0.0004963650 0.0008516443 0.0003862781 -0.0002782709 -0.0003980260 0.0000950003 0.0002779401 0.0000568930 -0.0000934321 -0.0001206717 -0.0003061875 0.0000645799 0.0018362503 0.0000331972 -0.0007387574 0.0030880659 0.0052018839 -0.0004018136 -0.0029301471 -0.0001109304 0.0012341854 0.0019146807 0.0033622582 -0.0005030958 -0.0206817031 -0.0003200624 0.0087470914 0.0055313881 -0.0110972996 -0.0038959353 0.0000044236 0.0000020908 0.0000032264 -0.0000383471 -0.0000047363 -0.0000345379 0.0000020179 -0.0000002627 -0.0000009248 0.0001082818 0.0002090889 0.0002063606 -0.0001732830 -0.0012517041 -0.0008438302 0.0000564210 0.0003768691 0.0001749800 0.0001080588 -0.0000006081 -0.0000369816 -0.0000419320 0.0000842037 0.0001882075 -0.0001223027 0.0000205517 0.0000354914 0.0003306335 -0.0000758362 -0.0000100316 0.0004553256 0.0002251658 -0.0000917129 -0.0864459730 -0.0223011639 0.0345453508 0.0002838254 -0.0010823420 -0.0016148902 -0.0004540884 -0.0001137386 -0.0001386687 0.0002904653 0.0002983847 -0.0004679484 0.0003369376 -0.0004686026 -0.0000302327 0.0009093886 0.0002001261 -0.0000358795 -0.0000141357 -0.0000719713 -0.0000665539 -0.0018482181 0.0026423934 -0.0006319189 -0.0027436718 -0.0012829355 -0.0002505845 -0.0000045808 -0.0004614615 0.0011781367 0.0491747195 0.2960062257 -0.2404104167 0.8254018246 -0.0233862665 -0.3335673195 0.1445798171 -0.0043343334 0.1679056548 0.0000027660 -0.0000018031 -0.0000015208 0.0000006829 0.0000014992 0.0000033298 -0.0000118016 -0.0000045605 -0.0000094930 0.0000016531 -0.0000012407 -0.0000000767 -0.0000042776 0.0000056815 0.0000061217 0.0000224597 0.0000074604 0.0000235439 0.0000145472 -0.0000269545 -0.0000362732 0.0001096814 0.0000635507 0.0001039863 -0.0000189215 0.0000011548 -0.0000079719 0.0000226876 -0.0000450435 -0.0000771711 -0.0002364856 -0.0000940952 -0.0002590943 0.0000028848 0.0000153571 0.0000390631 -0.0000076554 -0.0000022068 0.0000042145 0.0000017460 0.0000004119 -0.0000005702 -0.0000009710 0.0000001894 0.0000013526 -0.0000027436 -0.0000000353 0.0000032545 -0.0000229972 -0.0001812752 -0.0004551672 0.0000575482 0.0000029268 -0.0000481099 -0.0000035386 -0.0000038736 -0.0000020819 0.0000040535 -0.0000059728 -0.0000083707 0.0000397078 0.0000033838 -0.0000340655 0.0000050037 -0.0000013263 0.0000027211 0.0000099093 0.0000020923 0.0000037857 0.0000010684 0.0000019682 0.0000015624 0.0000016019 0.0000017835 0.0000000074 0.0000025146 -0.0000020809 0.0000003726 0.0000019868 -0.0000003978 -0.0000004605 0.0000027047 0.0000142273 -0.0000060303 -0.0000404168 -0.0000169443 0.0000132985 -0.0000102317 -0.0001709207 0.0000683612 0.0004515837 0.0001969095 -0.0001529694 0.0000003067 0.0000237669 -0.0000083484 0.0000060599 -0.0000038578 0.0000003019 -0.0000036619 -0.0002741014 0.0000956210 -0.0000863758 0.0000569464 -0.0000062343 0.0000002221 0.0000002840 0.0000002362 0.0000022108 0.0000017286 0.0000015368 0.0000001874 0.0000050849 -0.0000025186 0.0000091113 0.0000093522 0.0000080243 -0.0000031898 -0.0000476486 0.0000205551 -0.0001062572 -0.0001238015 -0.0000793520 0.0000002920 -0.0000038195 0.0000043183 -0.0000231131 0.0000087448 -0.0000422984 0.0000135084 0.0000605265 -0.0000358104 0.0002579061 -0.0001089658 0.0004813615 0.0001396026 -0.0001131190 0.0000266334 0.0000296201 0.0002188797 0.0002603594 -0.0017470365 0.0009264520 0.0002825478 -0.0000969419 0.0004829522 -0.0006534957 -0.0000193060 -0.0000875267 0.0000303890 -0.0001456871 -0.0000624871 -0.0002572232 0.0005222538 0.0005451868 -0.0005021182 0.0001499582 0.0004135403 0.0002999625 0.0000001557 0.0000002126 -0.0000002550 0.0000032788 0.0000827878 -0.0000322964 -0.0000006439 -0.0000073929 0.0000027839 -0.0000003435 -0.0000001901 0.0000000910 0.0000008275 0.0000008595 -0.0000001196 -0.0000004093 0.0000000496 -0.0000004802 0.0000003025 0.0000002853 0.0000001079 -0.0000022857 -0.0000111302 0.0000068249 -0.0000006404 -0.0000002856 -0.0000005434 0.0000296581 0.0001299822 -0.0000812083 0.0000005967 0.0000003487 0.0000003964 -0.0000004136 0.0000008473 0.0000008396 -0.0000008613 -0.0000015094 -0.0000003869 0.0000016772 0.0000031162 0.0000005450 0.0000008862 0.0000008713 0.0000003468 0.0006566571 0.0010877193 0.0000278014 -0.0006817399 0.0010936901 0.0007915239 0.0000553133 -0.0000965724 -0.0000671074 -0.0000001555 0.0000174547 0.0000077427 -0.0000345139 -0.0000008148 0.0000199469 0.0000717710 0.0001194735 -0.0000030168 -0.0004609538 -0.0001163298 0.0002615085 0.0000001423 -0.0000093590 -0.0000016750 0.0004284792 0.0000899429 -0.0002293518 -0.0007242373 -0.0015887757 -0.0000837424 0.0052022737 0.0013221769 -0.0029872714 -0.0001284493 -0.0000540398 0.0000829066 0.0010975342 0.0012273057 0.0000355763 -0.0125019234 -0.0133339633 -0.0005659305 0.0012895186 -0.0007257934 -0.0006561413 -0.0200765902 0.0383194190 0.0137986061 -0.0212770297 -0.0326347753 0.0040051817 0.0058129002 0.0012433524 -0.0025157750 -0.0096449008 -0.0188086992 0.0018920599 0.0511818221 0.0004041973 -0.0212352716 0.2325446559 0.3948843904 -0.0394942433 -0.0714937889 -0.0038881183 0.0321986336 0.1260712194 0.2181135316 -0.0288602017 -0.6013220444 -0.0074239764 0.2489650445 0.2277448535 -0.4569311379 -0.1590908659 0.0000145754 0.0000080262 0.0000013503 -0.0002010931 -0.0000267814 -0.0000030671 -0.0000006696 -0.0000005044 0.0000001587 -0.0000289326 0.0000538797 -0.0000127745 -0.0000773706 -0.0000410251 -0.0000084475 0.0000314962 0.0000307670 -0.0000038172 -0.0000085020 -0.0000078867 0.0000052107 -0.0000037403 0.0000012832 0.0000085896 -0.0001401245 0.0003205636 0.0001166788 0.0000035909 -0.0000044089 0.0000034227 0.0000196132 0.0000275634 0.0000470848 0.0023052668 0.0003010286 -0.0007396748 0.0000009429 -0.0000536255 -0.0000627853 0.0000518573 0.0000156638 0.0000169517 0.0000177440 0.0000662452 -0.0000882351 0.0020929022 -0.0027053459 0.0003704928 0.0005699204 0.0002278483 -0.0000429065 -0.0004027465 -0.0013743103 -0.0015705287 -0.0000285919 0.0000438936 0.0000264226 -0.0000015552 0.0000140190 0.0000038828 0.0000115223 0.0000318990 -0.0001036510 -0.0006990186 -0.0048974842 0.0042959095 -0.0217607079 0.0005607192 0.0090927747 -0.0044704676 0.0003054635 -0.0048435682 0.0000005638 -0.0000018943 -0.0000029781 0.0000016569 0.0000025002 0.0000059503 -0.0000244519 -0.0000108802 -0.0000205402 0.0000057024 0.0000044639 -0.0000207841 0.0000045735 -0.0000120911 -0.0000128743 0.0000367979 0.0000148815 0.0000385443 0.0000277408 -0.0000734549 -0.0000678963 0.0003107013 0.0001477195 0.0002587957 -0.0000069790 0.0000943481 0.0001365536 -0.0000838210 0.0001573061 0.0001417947 -0.0004341200 -0.0001802864 -0.0004428156 0.0000007284 0.0000002015 0.0000001141 0.0000026422 0.0000002672 -0.0000030428 0.0000010948 0.0000005085 0.0000006311 0.0000001632 0.0000012260 0.0000043206 0.0000029791 0.0000007581 -0.0000024547 -0.0000026602 -0.0000012134 -0.0000058895 -0.0000379827 -0.0000010306 0.0000277266 -0.0000034909 0.0000010956 0.0000021671 -0.0000076183 -0.0000130763 -0.0000484685 -0.0000328011 -0.0000086265 0.0000282459 0.0000052009 -0.0000688862 -0.0000470584 -0.0000500064 -0.0000476925 -0.0000263002 0.0000005744 -0.0000007726 -0.0000011754 0.0000024916 -0.0000008924 -0.0000009389 -0.0000011892 -0.0000000696 0.0000001771 -0.0000002381 0.0000000548 0.0000000280 -0.0000006125 0.0000211006 -0.0000082791 0.0000267691 0.0000085582 -0.0000078402 -0.0000085639 -0.0002280660 0.0000916223 -0.0002924642 -0.0001215099 0.0000955008 0.0000012879 -0.0000102470 0.0000035201 -0.0000372507 0.0000236140 -0.0000020643 0.0000038115 0.0001290550 -0.0000491931 0.0004256931 -0.0002807652 0.0000266116 -0.0000001424 -0.0000000891 -0.0000001266 0.0000005758 0.0000002879 0.0000007207 -0.0000012742 -0.0000031629 0.0000002921 0.0000205189 0.0000230591 0.0000146266 0.0000072980 0.0000417509 -0.0000195658 -0.0002315196 -0.0002639524 -0.0001632844 0.0000028912 0.0000134464 -0.0000068609 -0.0000033862 -0.0000005152 -0.0000049865 -0.0000297656 -0.0001475425 0.0000771098 0.0000332422 -0.0000103552 0.0000593373 -0.0008889062 0.0006507961 0.0002071902 -0.0002536102 -0.0019439848 -0.0027297116 0.0107609519 -0.0052256150 -0.0014605109 0.0005068088 -0.0015287646 0.0020517168 0.0000069066 0.0000009433 0.0000125162 0.0000675508 -0.0000648150 0.0000234576 0.0000117324 0.0000217895 -0.0000501707 0.0000113192 -0.0000830186 -0.0000710236 0.0000870298 0.0000882760 -0.0000341896 0.0013581694 0.0441744850 -0.0170335699 -0.0002719765 -0.0038966128 0.0015222870 0.0001217566 0.0000248102 -0.0000151111 -0.0000358570 0.0001598069 -0.0000597257 -0.0000063973 -0.0000243719 -0.0000112129 0.0000267109 -0.0000081676 -0.0000257272 -0.0000635486 -0.0003102699 0.0002077139 -0.0000096620 0.0000183168 -0.0000213809 0.0009401775 0.0036656146 -0.0021693317 0.0000021936 -0.0000015990 0.0000047227 -0.0000074082 -0.0000118111 -0.0000012074 0.0000010541 0.0000047446 0.0000017893 -0.0000010831 -0.0000020868 0.0000001435 -0.0000009250 -0.0000019609 -0.0000008024 -0.0000094770 -0.0000130919 0.0000069347 0.0000578279 -0.0000853500 -0.0000662973 -0.0000059173 0.0000077848 0.0000057661 -0.0000002618 -0.0000008667 -0.0000004749 0.0000018498 0.0000001686 -0.0000015548 0.0000079322 0.0000173044 0.0000010739 0.0000167007 0.0000032398 -0.0000098486 -0.0000005005 -0.0000002353 0.0000002963 -0.0000260192 -0.0000048349 0.0000154314 -0.0000868843 -0.0001788787 -0.0000165119 -0.0001836498 -0.0000460081 0.0001039015 0.0000010269 0.0000014773 -0.0000002171 -0.0000017431 -0.0000031686 0.0000001747 0.0000224883 0.0000308494 0.0000042819 0.0000004163 0.0000002020 -0.0000002290 -0.0000198259 0.0000407924 0.0000141140 -0.0000062396 -0.0000085978 0.0000012768 -0.0000021380 0.0000010083 0.0000010513 -0.0000146977 -0.0000280927 0.0000030623 0.0000262735 -0.0000010034 -0.0000110460 0.0000661925 0.0001125765 -0.0000124450 0.0000182136 -0.0000048426 -0.0000036395 0.0001855176 0.0003153003 -0.0000398487 -0.0003134288 -0.0000050516 0.0001315607 0.0002341095 -0.0004768977 -0.0001616360 -0.0000059742 -0.0000001559 -0.0000002352 0.0001036928 0.0000134617 0.0000079961 -0.0000033138 -0.0000043214 0.0000012920 -0.0000002360 -0.0000000957 -0.0000001934 0.0000009514 0.0000000622 -0.0000002356 -0.0000006767 -0.0000001756 0.0000003142 0.0000005662 -0.0000004988 -0.0000008508 -0.0000003259 0.0000033924 0.0000067588 -0.0000009191 -0.0000142511 -0.0000064539 0.0000014979 0.0000036829 -0.0000024522 -0.0000005707 0.0000001358 0.0000006534 0.0000156167 0.0000052041 -0.0000094900 0.0000100116 -0.0000384811 -0.0000572612 -0.0000229799 -0.0000116932 -0.0000064748 0.0000118247 0.0000086237 -0.0000170337 -0.0000626333 0.0000851220 -0.0000090241 0.0000415854 0.0000057618 -0.0000069860 0.0000292542 0.0000825355 0.0001025485 0.0000093630 -0.0000133305 0.0000034753 -0.0000223504 -0.0000150820 -0.0000031261 -0.0000092860 -0.0000206161 0.0000416751 -0.0000132853 -0.0000748590 0.0000602073 -0.0001583144 0.0000008000 0.0000650133 -0.0000112909 -0.0000019669 -0.0000138972 0.0000157898 -0.0000494928 -0.0000029590 -0.0000197547 0.0000026337 -0.0000139411 0.0000030539 -0.0000049198 -0.0000034435 -0.0000077531 0.0000030246 0.0000004357 -0.0000022354 -0.0000217293 -0.0000314058 0.0002882443 0.0001403903 0.0003045150 -0.0000209172 0.0001287209 0.0001487666 -0.0000343818 -0.0000015932 -0.0000042541 0.0000073125 -0.0000037642 -0.0000012313 -0.0001569150 0.0003958075 0.0004132274 -0.0035042090 -0.0014789219 -0.0034944889 -0.0000019660 -0.0000136403 -0.0000428407 0.0000018559 0.0000012165 -0.0000002072 0.0000004591 0.0000003901 0.0000005358 -0.0000012982 -0.0000015762 -0.0000039098 0.0000043151 0.0000024591 -0.0000011776 0.0000382753 0.0001651087 0.0004875184 -0.0000002589 -0.0000019885 -0.0000023118 0.0000010855 -0.0000003181 -0.0000005108 0.0000094524 0.0000145428 0.0000446524 -0.0000177539 -0.0000084083 0.0000179814 -0.0000018017 0.0000022210 0.0000023483 -0.0000024107 0.0000005960 -0.0000006310 -0.0000001707 0.0000000167 -0.0000000126 -0.0000005799 0.0000001667 -0.0000000457 0.0012165112 0.0003896080 -0.0003216438 0.0004441029 0.0000726451 -0.0001369076 0.0000224732 -0.0354098537 0.0140196854 -0.0256429818 -0.0066147314 0.0068615822 0.0137762005 0.3921470961 -0.1581354539 0.2746311768 0.1135037931 -0.0900355955 -0.0018023858 0.0219773719 -0.0077710600 0.0576066764 -0.0372621187 0.0034398152 -0.0093967721 -0.2669882273 0.1015751985 -0.6597452810 0.4378294828 -0.0431210434 0.0000910328 0.0000250230 -0.0001039592 -0.0000474177 -0.0000340509 -0.0000580523 0.0003040521 0.0009971436 -0.0003937233 -0.0027515317 -0.0031326573 -0.0019580394 -0.0022413413 -0.0118605290 0.0058408830 0.0316720596 0.0362318863 0.0221982743 -0.0005595318 -0.0025129567 0.0012335076 0.0008141482 0.0000032288 0.0012646468 0.0055547716 0.0278887950 -0.0146726187 -0.0078920705 0.0030107143 -0.0146433566 -0.0000041413 0.0000040242 0.0000036207 -0.0000002955 -0.0000273504 -0.0000369678 0.0000535693 -0.0000306652 -0.0000064441 0.0000003000 0.0000015162 -0.0000061130 0.0000039334 0.0000047149 0.0000043979 -0.0000247521 0.0000139452 -0.0000327684 -0.0000188004 -0.0000192135 0.0000125676 -0.0000077390 -0.0000532651 -0.0000385549 0.0000035746 0.0000058366 0.0000009267 -0.0000526293 -0.0021493887 0.0008175309 0.0000039635 0.0001945646 -0.0000720642 0.0000041414 -0.0000134266 -0.0000085681 0.0000076770 -0.0000368405 0.0000067192 0.0000632948 0.0001575788 -0.0000655775 -0.0001031024 -0.0000328575 -0.0000912197 -0.0008620207 -0.0037512356 0.0023398822 -0.0000468284 0.0000794677 -0.0001022165 0.0111121842 0.0429284165 -0.0251514977 0.0000034629 -0.0000074787 0.0000028131 0.0000038604 0.0000046603 0.0000010445 -0.0000044402 -0.0000009977 -0.0000004894 0.0000041525 0.0000008492 -0.0000015676 0.0000021175 0.0000005314 0.0000015873 0.0000128104 0.0000274682 -0.0000000078 -0.0000942490 0.0001541644 0.0001096140 0.0000066691 -0.0000142023 -0.0000092579 -0.0000003045 0.0000008004 0.0000002762 0.0000024850 0.0000018994 -0.0000009078 0.0000154077 0.0000325369 0.0000018780 -0.0000137503 -0.0000045446 0.0000074494 -0.0000010819 -0.0000019149 -0.0000004033 -0.0000276736 -0.0000085862 0.0000089271 -0.0001768087 -0.0003698697 -0.0000277958 0.0001666010 0.0000419501 -0.0000941305 0.0000001955 -0.0000019621 -0.0000010595 0.0000024593 0.0000030266 0.0000034153 -0.0000377187 -0.0000432321 -0.0000076945 -0.0000008688 -0.0000005828 0.0000000270 -0.0000153266 0.0000313986 0.0000108447 0.0000100552 0.0000187325 -0.0000014634 0.0000067822 0.0000013744 -0.0000029168 -0.0000118688 -0.0000226717 0.0000025006 0.0000208237 -0.0000017798 -0.0000088903 -0.0001163751 -0.0001986074 0.0000183730 -0.0000840642 -0.0000094417 0.0000391720 0.0001454305 0.0002561080 -0.0000319311 -0.0002387341 -0.0000007474 0.0000998899 0.0001797011 -0.0003634308 -0.0001251994 0.0000113281 0.0000019735 -0.0000001721 -0.0001694301 -0.0000069049 0.0000037284 -0.0000379596 -0.0000457143 0.0000255917 -0.0000002055 -0.0000009039 -0.0000022272 -0.0000007794 0.0000013914 0.0000018339 0.0000000027 0.0000012046 -0.0000006726 0.0000003685 -0.0000038610 0.0000012647 -0.0000057867 -0.0000192545 -0.0000237000 0.0000149075 -0.0000020841 -0.0000026977 0.0000003442 -0.0000012573 0.0000039350 0.0000008811 0.0000000864 -0.0000007447 -0.0000163148 -0.0000089641 0.0000137463 -0.0000672565 0.0002158634 0.0003304458 0.0000484974 -0.0000128041 0.0000379311 0.0000736986 0.0000552493 -0.0000797503 -0.0000632359 0.0000852210 -0.0000160575 -0.0001252666 -0.0000382310 0.0000222296 -0.0000005947 0.0000057350 0.0000121941 -0.0000240562 0.0000279669 -0.0000032929 0.0000011338 -0.0000008939 0.0000006073 0.0000120544 0.0000101198 -0.0000457348 0.0000195263 0.0001114951 -0.0000934862 0.0001762191 -0.0000066661 -0.0000687652 -0.0000037793 -0.0000045616 0.0000019008 -0.0000015502 0.0000030444 -0.0000006691 0.0000019687 0.0000005822 0.0000021689 -0.0000018247 0.0000006865 -0.0000003030 0.0000021710 -0.0000013091 -0.0000003951 -0.0000000965 0.0000008977 0.0000010187 -0.0000097941 -0.0000060806 -0.0000113663 0.0000038365 -0.0000206954 -0.0000194054 0.0000179917 0.0000055753 0.0000151743 -0.0000052412 0.0000006633 -0.0000003921 0.0000008036 -0.0000139501 -0.0000142039 0.0001161867 0.0000528771 0.0001193311 -0.0000266918 -0.0001660485 -0.0005214900 -0.0000299487 0.0000014062 0.0000411290 0.0000095048 0.0000046915 0.0000027201 -0.0000065777 -0.0000004838 0.0000112531 -0.0000025766 0.0000123287 0.0000310900 0.0004824471 0.0020700934 0.0060081169 0.0005852697 0.0001334675 -0.0004851361 -0.0000082065 -0.0000050205 -0.0000011091 0.0000112523 -0.0000300904 -0.0000869109 0.0002594742 0.0000519122 -0.0002716144 0.0000015808 -0.0000003711 -0.0000004805 0.0000025303 0.0000004179 0.0000009622 0.0000014407 0.0000013892 0.0000013720 0.0000033671 0.0000010479 -0.0000023477 -0.0000946649 -0.0000620214 0.0000297641 -0.0000535435 -0.0000031594 -0.0000991556 0.0000113667 0.0023580142 -0.0009286625 0.0018969908 0.0005474574 -0.0005238763 -0.0008954658 -0.0259752852 0.0104625062 -0.0204651471 -0.0084901528 0.0067094019 0.0001558713 -0.0013073136 0.0003945629 -0.0038061590 0.0024020466 -0.0002099661 0.0005420675 0.0160397272 -0.0060340885 0.0432491351 -0.0286881938 0.0027794806 -0.0000275195 0.0001823652 -0.0002379388 -0.0007725647 0.0001793810 -0.0012956526 0.0038779422 0.0135216056 -0.0040620142 -0.0412826225 -0.0462221436 -0.0297981472 -0.0297500074 -0.1636117676 0.0793066808 0.4722283234 0.5404896319 0.3318986060 -0.0083535011 -0.0381762099 0.0188313163 0.0142180917 -0.0011448486 0.0229100859 0.0841027704 0.4215709440 -0.2214113523 -0.1416705888 0.0548767564 -0.2632472319 0.0000005772 -0.0000030627 0.0000014480 0.0000020439 0.0000099323 0.0000145587 -0.0000035784 0.0000006389 0.0000007071 -0.0000034729 0.0000243336 -0.0000326389 0.0000060798 0.0000035244 0.0000010274 -0.0000332468 0.0000184855 -0.0000359886 -0.0000495106 -0.0000332163 0.0000412072 -0.0000087013 -0.0000223819 -0.0000112675 0.0000024551 0.0000033317 -0.0000008818 0.0000070595 0.0001484135 -0.0000613936 -0.0000023234 -0.0000138649 0.0000052835 0.0000037465 0.0000000569 -0.0000011176 -0.0000186527 -0.0000055299 0.0000046115 -0.0000078766 0.0000044855 -0.0000149478 0.0000020071 0.0000010371 0.0000030051 0.0000070097 0.0000343469 -0.0000218113 0.0000038919 0.0000016263 0.0000027621 -0.0000901656 -0.0004106328 0.0002652317 0.0000195877 -0.0000138304 0.0000079175 0.0000219366 0.0000130604 0.0000114205 -0.0000360078 -0.0000026576 -0.0000232516 0.0000216660 0.0000020246 0.0000223172 0.0000792460 0.0000453126 0.0000416309 -0.0020084735 -0.0028630182 0.0001540366 0.2888538449 -0.4629020790 -0.3360601700 -0.0248695709 0.0396922846 0.0289207390 -0.0004880832 -0.0023631240 -0.0004534970 0.0206853390 0.0028350415 -0.0115613777 -0.0128480103 -0.0286003740 -0.0017245835 0.0430415235 0.0115318496 -0.0241304113 -0.0006443600 0.0007563639 0.0006397013 -0.2483779388 -0.0539683706 0.1312825589 0.1581662640 0.3521368861 0.0204298906 -0.4994469098 -0.1215493992 0.2859513264 0.0005279413 0.0004384964 -0.0002582339 -0.0037206439 -0.0046443495 -0.0002896023 0.0406793187 0.0510766319 0.0042484781 -0.0001061503 0.0001232407 0.0000502749 -0.0002683239 0.0005392593 0.0001880118 0.0001413593 0.0002849142 -0.0000124202 -0.0001088487 0.0000245477 0.0000543712 -0.0000979520 -0.0002045793 0.0000174051 0.0004497027 -0.0000408941 -0.0001914141 -0.0016434018 -0.0029686117 0.0002038780 0.0013424907 0.0000646838 -0.0006126123 0.0013023440 0.0022094781 -0.0003148478 -0.0050672699 -0.0000543617 0.0020929488 0.0031118780 -0.0062503271 -0.0021852402 0.0005571518 0.0001780420 -0.0000473747 -0.0074420589 -0.0010943116 0.0000302146 -0.0000013230 -0.0000036859 0.0000027582 0.0000264549 0.0000523635 0.0001066311 0.0000119268 -0.0000331800 0.0000030088 -0.0000049377 -0.0000028572 -0.0000021740 0.0000069779 0.0000068838 -0.0000048287 0.0000028462 0.0000338296 0.0000566554 0.0000621084 0.0001473024 0.0001353557 0.0000051421 -0.0000022473 0.0000021274 -0.0000061194 0.0000021956 0.0000002841 0.0000499758 0.0000011548 -0.0000036784 0.0001388531 -0.0003653850 -0.0006118636 -0.0002133641 -0.0000809546 -0.0000738210 0.0000163399 0.0000193051 0.0000112471 0.0002491938 -0.0003083353 0.0000482128 -0.0006297114 -0.0001729631 0.0000760729 -0.0003862388 -0.0013730490 -0.0017657121 -0.0000248925 0.0000354904 -0.0000154986 -0.0000522266 -0.0000252107 -0.0000168607 -0.0000051231 0.0000015064 0.0000365668 0.0000055185 -0.0000385801 0.0000415360 -0.0004263326 0.0000120349 0.0001773989 -0.0001535351 0.0000141069 -0.0001729159 -0.0000032344 -0.0000030607 -0.0000047422 0.0000050607 0.0000025858 0.0000035786 -0.0000300275 -0.0000071880 -0.0000245092 0.0000022144 -0.0000005515 -0.0000010620 0.0000042238 -0.0000137685 -0.0000138797 0.0000492045 0.0000230575 0.0000531609 -0.0000241800 -0.0000659563 -0.0000363591 0.0002802214 0.0000212082 0.0002440441 0.0000069304 -0.0000057279 -0.0000077738 -0.0000584673 0.0001847703 0.0001854902 -0.0005731592 -0.0002326103 -0.0005808689 0.0000059643 0.0000046141 0.0000015460 0.0000079963 -0.0000056207 -0.0000120779 -0.0000271803 0.0000139760 0.0000119728 -0.0000657998 -0.0001397150 -0.0005156698 -0.0001336442 -0.0000337152 0.0001326503 -0.0000029581 -0.0000190729 -0.0001036723 -0.0000494075 -0.0000296290 0.0000251791 -0.0000787173 -0.0000022916 0.0000684712 0.0010194586 0.0016869811 0.0060633538 0.0017467863 0.0005241112 -0.0015901374 -0.0000039992 0.0000026212 0.0000050078 -0.0000028420 0.0000011421 0.0000027942 0.0000316068 -0.0000313653 -0.0000033114 0.0000570541 -0.0000200711 -0.0000326939 -0.0000001472 0.0000004583 -0.0000002657 -0.0000008501 -0.0000012893 0.0000007643 -0.0000021622 0.0000069145 -0.0000025741 0.0000364010 0.0000143652 -0.0000117794 -0.0000023858 -0.0000734398 0.0000267057 -0.0003944388 -0.0001708167 0.0001308883 -0.0000005804 -0.0000060316 0.0000024034 0.0000020646 -0.0000022647 0.0000004557 0.0000070012 0.0000767232 -0.0000315455 -0.0000108523 0.0000111835 -0.0000008133 -0.0000014953 -0.0000003955 -0.0000014790 -0.0000014878 -0.0000009481 -0.0000007941 0.0000024391 0.0000097559 -0.0000031770 -0.0000099544 -0.0000100094 -0.0000078222 -0.0000230163 -0.0001071111 0.0000466907 0.0001149311 0.0001350178 0.0000814504 -0.0000048341 -0.0000187171 0.0000084107 0.0000173409 -0.0000055498 0.0000316498 0.0000425234 0.0002006608 -0.0000967958 -0.0001862570 0.0000825055 -0.0003488614 -0.0003451166 0.0010054071 0.0012411629 -0.0010191930 -0.0103441510 -0.0137977743 0.0058724254 -0.0030230477 -0.0007862180 -0.0003493324 0.0012036014 -0.0015235677 0.0001241731 0.0003721068 0.0002744603 -0.0006431075 0.0002166940 -0.0009570732 -0.0004399569 -0.0007558767 0.0003699925 -0.0002390528 -0.0040282869 -0.0030268558 0.0000700885 -0.0001285385 -0.0001948972 0.0012591401 0.0180422691 -0.0076051937 -0.0000073638 -0.0016238888 0.0006817027 -0.0000555881 -0.0000030113 0.0000084987 0.0001343985 -0.0000642411 0.0000224550 -0.0000100166 0.0000036101 -0.0000147872 0.0000096264 -0.0000024180 0.0000004975 -0.0000024973 -0.0000090741 0.0000037738 0.0000001427 -0.0000020162 0.0000028051 0.0000260215 0.0001030121 -0.0000648793 0.0000167346 -0.0000072759 0.0000144289 0.0000189049 0.0000016754 0.0000177641 -0.0000166337 0.0000130329 -0.0000302374 0.0000013612 -0.0000055231 0.0000140301 0.0000090335 -0.0000311443 0.0000309591 -0.0000801271 -0.0001616849 -0.0000047010 -0.0003366947 0.0005318666 0.0003847401 0.0000331830 -0.0000443088 -0.0000351501 -0.0000030841 -0.0000099525 -0.0000023071 -0.0000408314 -0.0000097851 0.0000219190 -0.0000402876 -0.0000705288 0.0000011451 0.0001664006 0.0000450751 -0.0000928675 0.0000021403 0.0000097304 0.0000009697 0.0004863358 0.0001191707 -0.0002499303 0.0003952976 0.0008521091 0.0000473241 -0.0019243178 -0.0004665912 0.0010999345 0.0000069410 0.0000197432 0.0000035641 0.0000176372 0.0000275672 -0.0000036672 -0.0002885575 -0.0002994554 0.0000062095 0.0000673425 0.0000008052 -0.0000273931 0.0004585008 -0.0010914362 -0.0003447775 -0.0008439701 -0.0013929833 0.0001436609 -0.0004087258 -0.0000667682 0.0001791607 0.0006976465 0.0012676734 -0.0001469428 0.0005281256 0.0001130982 -0.0002020438 0.0093961004 0.0160546440 -0.0015791329 0.0049795661 0.0002866398 -0.0022604634 -0.0082773052 -0.0143771066 0.0018824085 -0.0060657219 -0.0001965057 0.0024875221 -0.0059173688 0.0120901485 0.0041572261 -0.0000369192 -0.0000130162 0.0000014783 0.0005722352 0.0001759253 -0.0000326397 0.0000010589 -0.0000000451 -0.0000034362 0.0000004711 0.0000051610 0.0000065445 -0.0000116447 -0.0000127068 -0.0000052052 0.0000131509 0.0000072085 0.0000051680 -0.0000130003 -0.0000046560 -0.0000135336 -0.0000178626 0.0000073302 0.0000421002 -0.0001059744 0.0000406020 0.0000405914 -0.0000254927 0.0000008957 0.0000098432 0.0000024509 0.0000021944 0.0000040642 -0.0000366010 -0.0000129386 -0.0000019901 0.0000467533 -0.0002021956 -0.0003405857 0.0001194211 -0.0000009962 0.0000614494 0.0001018280 0.0001250644 -0.0001553497 0.0006329739 -0.0007011072 0.0000419203 0.0006064676 0.0003545799 -0.0004530131 0.0000790169 -0.0000664545 -0.0000802226 0.0001237751 -0.0001328425 -0.0000019611 0.0001646840 0.0000955273 0.0000945728 0.0000666639 0.0000701178 -0.0001030159 0.0000181784 0.0001325821 -0.0001060573 0.0002495786 -0.0000070278 -0.0000986189 0.0001622176 -0.0000016399 0.0001922356 -0.0013978668 0.0027466717 0.0022011484 0.0002704944 0.0004211048 0.0006327843 -0.0006842378 -0.0005929951 -0.0009601612 -0.0002253148 0.0002036656 0.0000777685 0.0001461849 0.0082651255 0.0099625863 -0.0580200105 -0.0244984891 -0.0591190393 0.0005799535 -0.0044748347 -0.0044248011 0.0109213442 0.0051585881 0.0103521373 0.0000941462 0.0000938796 0.0001626420 0.0385606430 -0.1119034694 -0.1142848609 0.6613637896 0.2741431489 0.6716437386 0.0000064228 0.0000297019 0.0000833997 0.0000103049 0.0000009321 -0.0000134261 0.0000017025 0.0000010985 0.0000003774 -0.0000003534 -0.0000006620 0.0000000023 -0.0000020697 -0.0000001549 0.0000030784 -0.0000691444 -0.0003378850 -0.0009490738 -0.0001587791 -0.0000330463 0.0001360418 -0.0000027071 -0.0000006616 -0.0000015798 -0.0000041287 0.0000063629 0.0000040224 0.0000287146 0.0000120068 -0.0000324239 -0.0001252099 -0.0000370510 -0.0000910854 -0.0000358759 -0.0000186792 -0.0000314698 0.0000007792 0.0000002549 0.0000011939 0.0000012816 -0.0000002008 0.0000003028 -0.0000076097 0.0000390923 -0.0000022045 0.0000267165 0.0000209567 -0.0000129477 -0.0000270331 -0.0002186444 0.0000941463 0.0000606511 0.0000339757 -0.0000238300 0.0001637127 0.0024429097 -0.0010127342 -0.0006702293 -0.0003305086 0.0002324220 -0.0000224331 0.0001140199 -0.0000400757 0.0002767204 -0.0001722057 0.0000141958 -0.0000474141 -0.0013564863 0.0005212961 -0.0030707066 0.0020513957 -0.0002080204 -0.0000002063 -0.0000002177 -0.0000022291 0.0000005147 0.0000002594 0.0000023466 0.0000041774 0.0000282046 -0.0000138834 -0.0000150005 -0.0000191068 -0.0000076621 -0.0000296184 -0.0003345364 0.0001696813 0.0001834322 0.0002072334 0.0001229728 0.0000016608 0.0000070505 -0.0000030629 -0.0000149768 0.0000074596 -0.0000291725 -0.0000124091 -0.0000594436 0.0000287292 0.0001763534 -0.0000735864 0.0003270737 -0.0000362437 0.0000308608 0.0000103623 -0.0000152872 -0.0001125595 -0.0001608016 0.0004403488 -0.0002086210 -0.0000611233 0.0000256170 -0.0000790029 0.0001066771 -0.0000067589 -0.0000023601 -0.0000043211 0.0000533236 -0.0000413138 0.0000785897 0.0000373133 0.0000320425 -0.0000493468 0.0000122962 0.0000309379 0.0000147986 -0.0000007627 -0.0000036086 -0.0000060469 0.0000195001 0.0003101151 -0.0001371615 0.0000014635 -0.0000301449 0.0000128977 -0.0000030917 -0.0000006666 0.0000004353 0.0000101276 0.0000011123 -0.0000006226 0.0000008206 -0.0000002790 0.0000011251 0.0000002415 0.0000000192 -0.0000002488 0.0000029501 0.0000137760 -0.0000082130 0.0000004301 0.0000003626 0.0000006348 -0.0000381533 -0.0001626788 0.0000993541 -0.0000026534 -0.0000006722 -0.0000002281 -0.0000053530 -0.0000051459 0.0000006405 0.0000059054 0.0000046657 -0.0000022730 -0.0000067530 -0.0000014507 0.0000037040 -0.0000053840 -0.0000069273 0.0000008458 -0.0009671158 0.0002662400 0.0003433532 -0.0139684479 0.0223633441 0.0162397624 0.0012394238 -0.0019253659 -0.0014226376 -0.0000551140 -0.0001281901 -0.0000001906 -0.0010354826 -0.0001340445 0.0005801598 -0.0000883726 0.0001666402 0.0001093101 0.0020497943 0.0005199206 -0.0011607373 -0.0000109005 -0.0000352260 -0.0000061900 0.0123454665 0.0026658895 -0.0065267601 -0.0004650370 -0.0014317045 -0.0001913450 -0.0229575999 -0.0056714101 0.0131902227 0.0000479603 -0.0002012225 -0.0000936016 -0.0020744992 -0.0026094570 -0.0002903741 0.0265791571 0.0304595021 0.0018859814 -0.0023105624 0.0001290327 0.0009950866 -0.0180007889 0.0410482968 0.0133042666 0.0285434756 0.0472222977 -0.0048448493 0.0121582321 0.0017183880 -0.0053424814 -0.0198171687 -0.0366198585 0.0040932761 -0.0161174424 -0.0040638604 0.0060710384 -0.3185321528 -0.5442443120 0.0535546014 -0.1475686813 -0.0065208575 0.0666152332 0.2420160622 0.4177956360 -0.0555312180 0.1833578332 0.0064207010 -0.0751460905 0.2250332604 -0.4580598276 -0.1579528497 -0.0000214716 0.0000004718 0.0000047942 0.0003849349 0.0001150581 0.0000114372 0.0000023872 0.0000016219 -0.0000006008 0.0000465854 0.0000139164 0.0000979458 0.0002047807 -0.0001047444 -0.0000917245 -0.0000383787 -0.0000123778 0.0000075621 -0.0000031024 0.0000014943 -0.0000011438 0.0000041068 0.0000093004 0.0000066837 -0.0004011212 0.0005823236 0.0001396164 0.0000027750 0.0000016263 -0.0000036119 -0.0001266882 -0.0000025634 -0.0000345386 0.0000307650 0.0002720096 -0.0000989678 0.0000270011 -0.0000641059 -0.0000926987 -0.0000682626 -0.0000268180 -0.0000245371 -0.0000147272 -0.0000194929 0.0000321837 0.0044916761 -0.0061544754 0.0007500868 0.0020748569 0.0006417437 -0.0001657789 -0.0005040151 -0.0015561482 -0.0018008954 0.0000550211 -0.0000161315 0.0000576258 -0.0000869997 -0.0000202938 -0.0000084462 -0.0000017397 0.0000187737 -0.0000165369 -0.0006682194 -0.0026100002 0.0020344864 0.0002359220 0.0001490309 -0.0001712362 -0.0001412904 -0.0001467371 -0.0002799280 -0.0000436806 0.0000824905 0.0000620178 0.0000066407 0.0000392460 0.0000518226 -0.0000742703 -0.0000427981 -0.0000761474 0.0000053830 0.0000133399 -0.0000348777 0.0000126654 0.0002318719 0.0002817398 -0.0017304302 -0.0007342956 -0.0017635569 0.0001490907 -0.0005034944 -0.0004812201 0.0010048543 0.0005007072 0.0009150890 -0.0000349315 0.0001625528 0.0002353656 0.0010314495 -0.0031688338 -0.0032724941 0.0197206731 0.0081710576 0.0200207776 0.0000002493 0.0000100754 0.0000311035 0.0000057489 0.0000015830 -0.0000053438 -0.0000007043 -0.0000006187 -0.0000015730 0.0000036128 0.0000075681 0.0000268748 0.0000027783 0.0000002093 -0.0000043440 -0.0000200675 -0.0001248579 -0.0003473632 -0.0000672329 -0.0000197853 0.0000646590 0.0000141888 -0.0000044080 -0.0000154633 -0.0000530123 -0.0000905704 -0.0003165923 -0.0000514940 -0.0000143855 0.0000506505 0.0000031153 -0.0001247265 -0.0000798160 -0.0000776819 -0.0000736797 -0.0000411896 -0.0000018253 0.0000019896 0.0000087379 -0.0000110085 0.0000026009 0.0000056684 0.0000004158 0.0000007780 0.0000001658 0.0000004545 0.0000010591 -0.0000000968 0.0000004832 0.0000037673 -0.0000014741 -0.0000162829 -0.0000078267 0.0000056768 -0.0000012654 -0.0000566355 0.0000230161 0.0001900557 0.0000786867 -0.0000619637 -0.0000026075 -0.0000414042 0.0000156857 -0.0000020565 0.0000049053 -0.0000013808 0.0000211517 0.0004701117 -0.0001790366 0.0000526016 -0.0000396500 0.0000055142 -0.0000002534 -0.0000005514 0.0000005045 0.0000000087 -0.0000005192 0.0000003816 -0.0000032541 -0.0000148992 0.0000065458 0.0000182294 0.0000211107 0.0000127645 0.0000314595 0.0001737377 -0.0000886579 -0.0002129579 -0.0002455905 -0.0001487389 0.0000046477 0.0000223324 -0.0000111569 -0.0000038305 -0.0000011712 -0.0000048071 -0.0000500210 -0.0002549602 0.0001344407 0.0000294982 -0.0000119253 0.0000550812 0.0011398237 -0.0007358418 -0.0001326580 0.0001933516 0.0013824053 0.0020685430 -0.0135503697 0.0064837516 0.0018087617 -0.0007894675 0.0020300398 -0.0027801197 0.0000443881 0.0000725377 0.0000276802 -0.0001858819 0.0000874584 -0.0002507146 -0.0003449854 -0.0003922695 0.0002951968 -0.0000703849 -0.0005585295 -0.0004286227 0.0000019117 0.0000027705 -0.0000018526 0.0000066104 0.0001445748 -0.0000553356 -0.0000019379 -0.0000137383 0.0000055699 0.0000033591 0.0000003902 -0.0000015871 -0.0000179501 -0.0000068753 0.0000046608 -0.0000037731 0.0000071390 -0.0000130819 -0.0000000961 0.0000001832 0.0000017466 0.0000169751 0.0000913922 -0.0000532136 0.0000093693 0.0000022450 -0.0000014162 -0.0002328343 -0.0010733208 0.0006700809 0.0000196631 -0.0000190397 0.0000110008 0.0000193926 0.0000089299 0.0000127468 -0.0000229153 0.0000104558 -0.0000392061 0.0000051198 -0.0000080731 0.0000158689 0.0000542166 0.0000351771 0.0000551946 0.0021662722 0.0020348805 -0.0004227349 0.2705765824 -0.4330435834 -0.3143653140 -0.0241819551 0.0374178956 0.0276937042 0.0009811211 0.0030816279 0.0005518882 0.0199212426 0.0024390139 -0.0112025152 0.0049928668 0.0030053692 -0.0020881817 -0.0548070959 -0.0141442495 0.0308500327 0.0002587921 0.0008031227 0.0000561403 -0.2367888372 -0.0511130467 0.1252440338 -0.0267256158 -0.0507997177 -0.0006245465 0.6243641907 0.1515415092 -0.3579872921 -0.0005157976 -0.0005937567 0.0002188609 0.0057411903 0.0072409514 0.0005528813 -0.0643166852 -0.0805984941 -0.0066792384 0.0000420790 -0.0002106270 -0.0000368936 -0.0006559611 0.0016283216 0.0005035932 0.0011700848 0.0018586531 -0.0002151238 0.0009453048 0.0000777622 -0.0004242537 -0.0011249086 -0.0020234467 0.0002399430 -0.0015740513 -0.0001578914 0.0006275590 -0.0130021341 -0.0219242663 0.0022915426 -0.0113958151 -0.0005166922 0.0051284207 0.0134692218 0.0232613062 -0.0030794173 0.0176761720 0.0004252057 -0.0072764284 0.0086788749 -0.0178254725 -0.0061040546 -0.0002450629 -0.0001042538 0.0000312892 0.0018086171 -0.0011537719 -0.0004586329 -0.0000695820 -0.0000266830 0.0000435150 -0.0000296009 -0.0000951220 -0.0001832941 0.0000043478 0.0001077388 0.0000261290 -0.0000255188 -0.0000210966 0.0000038604 -0.0000005104 0.0000008487 -0.0000057355 0.0000030842 -0.0000139107 -0.0000124968 -0.0000311886 0.0000424244 0.0000083966 -0.0000026115 0.0000039838 -0.0000025361 0.0000152378 -0.0000105369 -0.0000134250 -0.0000620051 0.0000211007 0.0000048328 -0.0000713431 0.0001460840 0.0001200578 0.0000578801 0.0000389861 0.0000277515 -0.0000175075 -0.0000155643 0.0000283038 0.0003410311 -0.0004995148 0.0000623583 0.0001846522 0.0000581126 -0.0000038789 -0.0000573393 -0.0001031412 -0.0000802740 0.0000412914 -0.0000521045 0.0000064878 0.0000064088 0.0000029736 -0.0000015563 -0.0000134791 -0.0000164981 0.0000511195 -0.0000491730 -0.0001342229 0.0000702564 0.0005877467 -0.0000142040 -0.0002604484 0.0001611151 -0.0000349516 0.0001595973 -0.0000077628 0.0000113168 0.0000085550 0.0000064969 -0.0000042606 -0.0000038988 -0.0000174946 -0.0000069411 -0.0000157883 0.0000013367 -0.0000002641 -0.0000014316 -0.0000015619 0.0000361429 0.0000418668 -0.0002142860 -0.0000927001 -0.0002203642 -0.0000255371 0.0000222900 0.0000639603 0.0002024117 0.0000963192 0.0001943500 -0.0000111246 0.0000078005 0.0000106853 0.0001534695 -0.0004771143 -0.0004845573 0.0024596714 0.0010226696 0.0025061412 -0.0001219831 -0.0006549185 -0.0018687033 -0.0001195183 -0.0000022277 0.0001998297 -0.0000252784 -0.0000144308 0.0000306276 -0.0000625098 -0.0001721492 -0.0006329103 -0.0001843933 -0.0000420931 0.0001874444 0.0014287499 0.0075084720 0.0210934825 0.0021796538 0.0004983625 -0.0019577732 -0.0001369575 0.0001046365 0.0002772145 0.0012055247 0.0021099064 0.0073581431 0.0023891661 0.0006952173 -0.0021981864 0.0000022796 -0.0000061330 -0.0000043428 0.0000010716 -0.0000013007 -0.0000008657 -0.0000044733 -0.0000213748 -0.0001742155 0.0001248352 -0.0000439004 -0.0000819390 0.0000011537 0.0000008445 -0.0000002243 -0.0000010028 -0.0000008439 0.0000011310 -0.0000010580 -0.0000103130 0.0000042291 0.0000008320 0.0000008751 -0.0000005524 0.0000034775 0.0001118648 -0.0000412216 -0.0000025621 -0.0000013175 0.0000045169 -0.0000025500 -0.0000305270 0.0000115927 0.0000145513 -0.0000071496 0.0000000483 0.0000187451 0.0003530122 -0.0001333148 -0.0001371022 0.0000939037 -0.0000066863 -0.0000009758 -0.0000012879 0.0000003662 -0.0000005906 -0.0000020962 0.0000001153 -0.0000013262 -0.0000123509 0.0000072601 -0.0000103000 -0.0000121742 -0.0000070879 0.0000199898 0.0001401301 -0.0000755539 0.0001019479 0.0001191477 0.0000728341 0.0000056099 0.0000243878 -0.0000117451 -0.0000149630 0.0000048291 -0.0000271924 -0.0000507736 -0.0002730154 0.0001492613 0.0001559307 -0.0000678960 0.0002974150 0.0004163904 -0.0012573598 -0.0015728160 0.0013139725 0.0130256389 0.0172537742 -0.0073211453 0.0037431039 0.0009830361 0.0004622363 -0.0014933345 0.0020212562 -0.0002278219 -0.0005430369 -0.0002854030 0.0007726018 -0.0002166385 0.0012910262 0.0014217368 0.0019255947 -0.0012433193 0.0001728657 0.0050756441 0.0036487518 0.0000000620 0.0000013879 0.0000000382 -0.0000034847 -0.0000219989 0.0000071155 -0.0000008483 0.0000004813 0.0000001044 0.0000145614 0.0000001440 0.0000009245 -0.0000010931 -0.0000048858 -0.0000000247 0.0001094585 0.0001392430 0.0000731833 -0.0000726008 -0.0000195350 -0.0000594864 0.0005331918 0.0027839473 -0.0015839888 0.0001653900 -0.0000583835 -0.0001175275 -0.0069391170 -0.0315551558 0.0191853674 -0.0000043424 0.0000232753 0.0000150076 -0.0000030237 0.0000051816 0.0000094526 0.0000248129 -0.0000124655 -0.0000260610 -0.0000165350 -0.0000030369 0.0000500935 -0.0000077399 0.0000010575 0.0000152163 -0.0001221126 -0.0001727163 -0.0000187324 -0.0058479608 0.0093604861 0.0068305013 0.0005181308 -0.0008005237 -0.0005965595 -0.0000122043 -0.0000791506 -0.0000244382 -0.0004990410 -0.0000692240 0.0002758136 -0.0000585839 0.0000714747 0.0000572019 0.0012888512 0.0003200689 -0.0007308437 -0.0000137744 -0.0000337659 -0.0000002095 0.0058721591 0.0012519975 -0.0030933359 -0.0000303342 -0.0003564180 -0.0000291718 -0.0146302780 -0.0035626477 0.0083902172 -0.0000008282 0.0000265996 0.0000129722 -0.0001779627 -0.0002334781 -0.0000519837 0.0021902289 0.0026755815 0.0002429314 -0.0000033548 0.0000086896 0.0000065668 0.0000032145 -0.0000188907 -0.0000040076 -0.0000049451 -0.0000058317 0.0000009451 -0.0000168119 -0.0000021538 0.0000078428 0.0000360989 0.0000621152 -0.0000078968 0.0000586649 0.0000019586 -0.0000240609 0.0000599512 0.0000886734 -0.0000142082 0.0001980013 0.0000125602 -0.0000985621 -0.0004128749 -0.0007036285 0.0000915320 -0.0006577858 -0.0000101233 0.0002703371 -0.0000862431 0.0001857445 0.0000608552 0.0000291613 0.0000144189 0.0000011775 -0.0003698372 -0.0000074721 -0.0000054056 -0.0030047748 -0.0010886622 0.0019249799 0.0000140791 0.0000222904 0.0000409160 -0.0000262060 -0.0000408246 -0.0000193607 0.0000319318 0.0000146768 0.0000059951 -0.0000214291 0.0000109413 -0.0000158768 0.0001064718 -0.0003750548 -0.0005397333 -0.0000196791 0.0000235662 0.0000206449 0.0000017683 -0.0000071760 0.0000054991 -0.0000003028 0.0000044881 0.0000042540 -0.0000463776 -0.0000123988 0.0000084224 -0.0012231983 0.0048265702 0.0054321220 0.0004736378 0.0001405443 0.0001806680 -0.0003072682 -0.0004495664 0.0010465275 0.0001764854 -0.0002695285 0.0000496914 0.0001897535 0.0000727959 -0.0000437676 -0.0000550277 -0.0001616338 -0.0002022849 0.0000907174 -0.0001444923 -0.0000257851 0.0000175067 0.0000274165 0.0000145255 0.0000050859 0.0000369958 -0.0000222096 0.0000158240 0.0001464850 -0.0001173862 0.0003823872 -0.0000036452 -0.0001498439 0.0001297536 -0.0000003559 0.0001612489 -0.0000018637 0.0000026101 0.0000020137 0.0000023685 -0.0000025503 -0.0000013678 -0.0000083716 -0.0000029236 -0.0000069240 0.0000001745 -0.0000001885 -0.0000002083 -0.0000013086 0.0000116871 0.0000137189 -0.0000551530 -0.0000239125 -0.0000560658 -0.0000084042 0.0000174053 0.0000141624 0.0000841503 0.0000328534 0.0000744311 -0.0000019622 -0.0000006666 -0.0000031789 0.0000519712 -0.0001437295 -0.0001523562 0.0006350371 0.0002670382 0.0006427252 -0.0051487558 -0.0283721853 -0.0812227710 -0.0077442359 -0.0006505795 0.0106666631 -0.0002760856 -0.0001368878 0.0000182072 0.0001391330 -0.0003046033 -0.0011861953 0.0003609848 0.0002653853 0.0002172883 0.0631975522 0.3276849297 0.9222973318 0.1245364190 0.0279323284 -0.1086983676 -0.0000478971 0.0000467819 0.0001940367 0.0011638443 0.0045343974 0.0140428082 -0.0025931446 -0.0008488804 0.0011417995 0.0000000338 0.0000003592 0.0000014152 0.0000014152 0.0000004088 0.0000014088 -0.0000058423 -0.0000201480 -0.0000493355 -0.0000370256 -0.0000540940 -0.0001465714 0.0000024487 -0.0000013452 -0.0000002306 0.0000016435 0.0000026510 0.0000003320 0.0000019984 -0.0000142643 0.0000053185 -0.0000555985 -0.0000247463 0.0000188177 0.0000026593 0.0001420132 -0.0000592462 0.0006118064 0.0002639323 -0.0002066556 0.0000002095 0.0000147193 -0.0000044757 -0.0000340677 0.0000249312 -0.0000028845 0.0000108438 -0.0001614850 0.0000395278 0.0003805212 -0.0002574687 0.0000263088 0.0000229836 -0.0000341078 0.0000543113 -0.0000335309 -0.0000387787 0.0000124800 -0.0000328241 -0.0000710352 -0.0000038805 0.0002316741 0.0002473935 0.0001792276 0.0001480902 0.0007354855 -0.0003630544 -0.0025589630 -0.0029474731 -0.0017893721 0.0000146581 0.0002003583 -0.0001335691 0.0000555415 -0.0000200021 0.0001004196 -0.0003677164 -0.0022779652 0.0013202864 -0.0005485962 0.0002819515 -0.0010891975 -0.0000080984 0.0000232298 0.0000133996 -0.0000088216 -0.0002091631 -0.0002568418 0.0001634609 -0.0000706101 -0.0000116601 -0.0000115280 -0.0000431424 0.0000562023 -0.0000364309 -0.0001778828 0.0000465938 -0.0011427542 0.0002888528 -0.0010268812 0.0006815414 0.0009408191 -0.0007626565 0.0004397350 0.0010293976 0.0010026182 0.0000154927 -0.0001049993 0.0000426623 -0.0000504758 -0.0124745951 0.0047519249 0.0001843669 0.0011621971 -0.0004732779 -0.0000692314 0.0001583866 -0.0000640566 -0.0000618691 -0.0000283905 0.0000202748 -0.0000353537 -0.0000404399 -0.0000310994 0.0000790371 0.0000011042 -0.0000243023 0.0000258129 0.0000908484 -0.0000491966 -0.0000119365 0.0000012882 -0.0000085121 -0.0002510584 -0.0008148229 0.0004087641 0.0000240015 -0.0000033996 0.0000181325 0.0000198361 0.0000063490 -0.0000014254 -0.0000209944 0.0000007893 -0.0000045744 0.0000150103 0.0000026022 -0.0000035213 0.0000100513 -0.0000012108 0.0000102429 0.0000018696 0.0000398426 -0.0000101267 -0.0002033614 0.0003300250 0.0002235545 0.0000171088 -0.0000317195 -0.0000204262 -0.0000011620 -0.0000003515 0.0000007177 0.0000397019 0.0000107143 -0.0000187895 0.0000042033 0.0000112891 0.0000017696 -0.0000115737 -0.0000027907 0.0000069982 -0.0000017682 0.0000018866 -0.0000000049 -0.0004413938 -0.0000994808 0.0002071803 -0.0000607911 -0.0001388024 -0.0000172256 0.0001353613 0.0000355156 -0.0000836478 -0.0000017568 -0.0000038612 0.0000011121 0.0000024638 0.0000051923 -0.0000025420 -0.0000315554 -0.0000360818 -0.0000002315 0.0000043667 -0.0000050632 -0.0000019941 0.0000648143 -0.0000928162 -0.0000400310 -0.0000670017 -0.0001230045 0.0000096817 0.0001284543 0.0000190193 -0.0000559054 -0.0001458575 -0.0002360084 0.0000348687 -0.0001301351 0.0000096536 0.0000562291 0.0007742472 0.0013353708 -0.0001286748 -0.0015246389 -0.0000728729 0.0006812900 0.0015749738 0.0027014624 -0.0003624908 0.0014761438 0.0000051748 -0.0006130176 -0.0005763041 0.0011175280 0.0003982938 0.0000416542 0.0000024225 0.0000003753 -0.0006721726 -0.0000228236 -0.0000167272 -0.0000093843 -0.0000052176 -0.0000057581 0.0000000969 0.0000016582 0.0000019899 -0.0000091624 -0.0000064058 0.0000001828 0.0000091043 0.0000036821 0.0000001297 -0.0000059410 0.0000019560 0.0000015909 0.0000006355 -0.0000182853 -0.0000234999 0.0000014887 0.0000229193 0.0000072117 -0.0000048598 0.0000028144 -0.0000052485 0.0000033345 -0.0000010312 -0.0000020995 -0.0000185088 0.0000040828 0.0000003910 -0.0000666719 0.0001460966 0.0002348962 0.0000988719 0.0000535675 0.0000487893 -0.0000110230 -0.0000132151 0.0000090998 0.0001365559 -0.0001969215 0.0000252919 -0.0000742138 0.0000081052 0.0000154086 -0.0000538370 -0.0000945576 -0.0001286212 0.0000652915 -0.0000751509 0.0000192617 0.0000250748 0.0000220622 0.0000103151 -0.0000104416 -0.0000114487 0.0000264699 -0.0000111783 -0.0000343293 0.0000223414 0.0001689634 -0.0000071277 -0.0000669350 0.0000473100 -0.0000082176 0.0000583288 -0.0000118289 0.0000242678 -0.0000127148 0.0000001688 0.0000340976 0.0000420753 -0.0000019301 0.0000032824 0.0000040481 0.0000103587 -0.0000051442 -0.0000010593 -0.0000058420 -0.0000106052 -0.0000133001 0.0000913749 0.0000250193 0.0000852626 0.0001363152 -0.0004543196 -0.0004671805 0.0000053675 0.0000027554 -0.0000076734 -0.0000148399 0.0000063092 0.0000019045 -0.0000295792 0.0001300207 0.0001275320 -0.0009194247 -0.0003498741 -0.0009410970 0.0000007381 -0.0000235108 -0.0000756440 -0.0000001486 -0.0000002255 -0.0000007364 0.0000065159 0.0000044555 0.0000033567 -0.0000039258 -0.0000039921 -0.0000074275 0.0000143867 0.0000066467 -0.0000058507 0.0000383110 0.0003035798 0.0008731366 0.0000145773 0.0000011946 -0.0000145563 -0.0000119074 -0.0000074246 -0.0000066875 0.0000109727 0.0000280284 0.0000733292 -0.0001335113 -0.0000555573 0.0000909173 0.0000045463 -0.0000041087 -0.0000025962 0.0000049861 -0.0000009431 0.0000020072 0.0000032084 0.0000038812 0.0000043121 0.0000052691 0.0000017568 -0.0000002752 -0.0013487201 -0.0005810986 0.0004521512 0.0008956078 -0.0006436473 0.0000506462 -0.0027105117 0.0273185962 -0.0103842904 0.0623553598 0.0254899281 -0.0202799555 -0.0072678443 -0.2860023544 0.1149130774 -0.6852882092 -0.2951366828 0.2292846033 0.0001510325 0.0327246363 -0.0120921270 0.0223616425 -0.0192019866 0.0030918532 -0.0150555724 -0.3800472858 0.1450226577 -0.2692788394 0.1843677868 -0.0196339842 0.0001036148 -0.0000280822 -0.0001356679 0.0000961341 -0.0000847430 0.0002032977 0.0005268423 0.0021174262 -0.0009557946 -0.0027770799 -0.0035690701 -0.0016740787 -0.0046100044 -0.0245856966 0.0123318297 0.0316482705 0.0367382342 0.0218580126 0.0009548842 0.0035717516 -0.0014823807 -0.0040925129 0.0016390036 -0.0076289404 -0.0075360247 -0.0366823781 0.0189326233 0.0446340834 -0.0189859476 0.0843094466 -0.0000072458 0.0000053652 0.0000034581 -0.0000068026 -0.0000252297 -0.0000341714 0.0000990643 -0.0000507655 -0.0000157770 -0.0000031470 -0.0000032860 0.0000015984 0.0000047006 0.0000152810 -0.0000113575 0.0000598776 -0.0000401258 0.0000915311 -0.0001160623 -0.0001109107 0.0000817158 -0.0000079595 -0.0000381778 -0.0000380159 -0.0000010971 -0.0000002094 -0.0000011105 -0.0000020497 0.0000261862 -0.0000127867 0.0000004631 -0.0000041079 0.0000012806 -0.0000008640 0.0000009549 0.0000009150 0.0000017150 0.0000019496 -0.0000001957 -0.0000008239 0.0000005556 -0.0000021901 -0.0000011338 -0.0000024449 0.0000005267 -0.0000105263 -0.0000532063 0.0000355305 0.0000013762 0.0000035802 -0.0000011421 0.0001633618 0.0005962824 -0.0003381072 0.0000008608 -0.0000002718 0.0000017304 -0.0000025140 -0.0000021955 0.0000007986 0.0000010234 0.0000009396 -0.0000019180 -0.0000024513 0.0000024435 0.0000040244 0.0000002980 -0.0000007608 0.0000020848 0.0003902488 0.0031421732 0.0007689699 -0.0023093966 0.0036613429 0.0026604785 0.0002273513 -0.0003120725 -0.0002458911 -0.0000860556 -0.0000473653 0.0000330324 -0.0002199542 -0.0000285607 0.0001247161 -0.0002736651 -0.0004679219 0.0000133366 0.0010459408 0.0002670236 -0.0005903656 -0.0000013074 -0.0000008827 -0.0000004732 0.0026077741 0.0005594992 -0.0013849861 0.0026293066 0.0056691894 0.0002883910 -0.0120724114 -0.0028738419 0.0068800078 -0.0002818562 -0.0003324631 0.0001012091 0.0020418960 0.0020048562 -0.0000436052 -0.0206731715 -0.0227113834 -0.0012560142 0.0013967894 -0.0011382923 -0.0007468696 0.0136399510 -0.0189501293 -0.0083886873 -0.0204233511 -0.0368300928 0.0030022796 0.0281700059 0.0039443364 -0.0124127225 -0.0295469197 -0.0472370586 0.0070662613 -0.0326959190 0.0024228855 0.0140470791 0.2352482142 0.4051454599 -0.0391377984 -0.3319174353 -0.0163301791 0.1497258051 0.3186006036 0.5428011255 -0.0740170664 0.3675413308 0.0017415888 -0.1526502043 -0.1196256864 0.2323985159 0.0821704554 0.0000246440 0.0000102559 0.0000051744 -0.0003422438 -0.0000268335 -0.0000174308 -0.0000025261 -0.0000029071 0.0000007077 -0.0000398569 -0.0000033739 -0.0000734526 -0.0000634837 0.0000964102 0.0000387865 0.0000011699 -0.0000157510 0.0000143639 -0.0000139980 -0.0000032438 -0.0000071240 0.0000029402 0.0000131662 0.0000133411 -0.0005770236 0.0009965952 0.0002494903 -0.0000027375 0.0000103488 -0.0000008543 0.0000700300 0.0000188518 0.0000251465 -0.0005672073 -0.0001696018 0.0001542802 0.0000239215 -0.0000892122 -0.0001438953 -0.0000340766 -0.0000233718 -0.0000165995 -0.0000122439 -0.0000000933 0.0000049000 0.0073602917 -0.0100589485 0.0013842388 0.0030577861 0.0008733477 -0.0001568730 -0.0008481104 -0.0028923190 -0.0032080666 0.0001433630 -0.0001021034 0.0000679979 -0.0000737385 0.0000016155 -0.0000093036 -0.0000016888 0.0000110705 -0.0000390713 0.0002799395 0.0015303552 -0.0011322459 0.0049019485 -0.0000973324 -0.0022235955 0.0014587346 0.0000894757 0.0014594203 -0.0000062666 0.0000063687 0.0000000217 0.0000016552 0.0000430483 0.0000546315 -0.0001604474 -0.0000738397 -0.0001476054 0.0000133434 0.0000128424 -0.0000369826 0.0000230753 -0.0000241887 -0.0000206429 -0.0001525709 -0.0000646696 -0.0001513949 0.0001982867 -0.0006229358 -0.0005757279 0.0019138534 0.0008923129 0.0017059507 -0.0000523737 0.0001968256 0.0002879011 -0.0001559315 0.0002234729 0.0001828693 0.0016914297 0.0006938610 0.0017063880 -0.0000008523 -0.0000113882 -0.0000368788 -0.0000153431 -0.0000032433 0.0000140503 0.0000015106 0.0000009870 -0.0000011099 0.0000007675 0.0000029344 0.0000103835 -0.0000054761 -0.0000004859 0.0000063499 0.0000317141 0.0001443451 0.0004201608 0.0001857390 0.0000393437 -0.0001582176 -0.0000026213 -0.0000035213 -0.0000050881 -0.0000155934 -0.0000318944 -0.0001113208 0.0000675578 0.0000114832 -0.0000644840 0.0000033513 -0.0001493569 -0.0000939196 -0.0000871016 -0.0000748784 -0.0000559091 0.0000013288 0.0000006514 0.0000038589 0.0000005724 0.0000006141 0.0000007587 -0.0000001695 0.0000014365 -0.0000001009 0.0000037810 -0.0000010907 0.0000049617 -0.0000026618 0.0000102191 -0.0000039856 0.0000306776 0.0000111562 -0.0000097858 -0.0000040243 -0.0001117574 0.0000439448 -0.0003328880 -0.0001441381 0.0001099470 -0.0000007046 0.0000510724 -0.0000153115 0.0000111306 -0.0000086354 0.0000015590 -0.0000125778 -0.0005851091 0.0002044723 -0.0001296160 0.0000905687 -0.0000107160 0.0000095958 0.0000156174 0.0000044664 -0.0000306281 0.0000088162 -0.0000554876 -0.0001567978 -0.0006650319 0.0002552107 0.0009907127 0.0012389236 0.0006136597 0.0014106547 0.0078135085 -0.0038152605 -0.0111581385 -0.0129348655 -0.0077207472 -0.0003225919 -0.0011745856 0.0004780482 0.0013544773 -0.0005343212 0.0025203167 0.0024799761 0.0120760043 -0.0062356844 -0.0147390052 0.0062850075 -0.0278529190 -0.0007281954 0.0004855149 0.0001531129 -0.0001797343 -0.0013063030 -0.0018900111 0.0088054380 -0.0043023331 -0.0010796277 0.0004194573 -0.0010909318 0.0014552635 -0.0000563340 -0.0000889359 0.0000107010 0.0000146557 -0.0000253713 0.0000656918 0.0005482189 0.0007332043 -0.0005473209 0.0000892347 0.0004418395 0.0003655124 0.0000037324 0.0000164937 -0.0000024617 0.0000581874 0.0023694961 -0.0009152011 -0.0000328650 -0.0002047877 0.0000861637 -0.0000011520 -0.0000418479 -0.0000173168 0.0000559377 -0.0000091537 -0.0000091683 0.0000333921 -0.0000234411 0.0000685554 0.0000258840 0.0000926918 -0.0000146079 0.0002493356 0.0012571556 -0.0008381884 -0.0000374507 -0.0000875625 0.0000212590 -0.0038543763 -0.0141019705 0.0079507258 -0.0000420334 0.0000134776 -0.0000360749 -0.0000321644 -0.0000045234 0.0000006693 0.0000326296 -0.0000031848 0.0000067857 -0.0000252704 -0.0000023884 0.0000078062 -0.0000153657 0.0000032625 -0.0000143961 -0.0000151213 0.0000370216 0.0000425781 0.0000493025 -0.0000791856 -0.0000431385 0.0000000534 0.0000144566 0.0000036009 -0.0000007795 -0.0000030829 -0.0000014747 -0.0000927131 -0.0000224989 0.0000466312 -0.0000253214 -0.0000448121 -0.0000007840 0.0000768377 0.0000189932 -0.0000441351 0.0000028648 -0.0000015753 0.0000000196 0.0010540590 0.0002423295 -0.0005257206 0.0002601696 0.0005494119 0.0000395326 -0.0008892327 -0.0002147610 0.0005126367 -0.0000118566 -0.0000056550 0.0000062089 0.0000718969 0.0000610551 -0.0000081182 -0.0006602263 -0.0007031260 -0.0000327848 0.0000595174 -0.0000438439 -0.0000308753 0.0005243392 -0.0007031383 -0.0003188358 -0.0008589115 -0.0015524379 0.0001254990 0.0011146616 0.0001570285 -0.0004913426 -0.0011856718 -0.0018989991 0.0002830796 -0.0014037617 0.0000967659 0.0006021468 0.0099096887 0.0170622191 -0.0016477491 -0.0131296637 -0.0006418669 0.0059283283 0.0128178117 0.0218239201 -0.0029781776 0.0157507983 0.0000820892 -0.0065410142 -0.0045069471 0.0087260696 0.0030914363 -0.0000630492 -0.0000039972 0.0000009604 0.0010110745 0.0000378229 0.0000045612 0.0000257520 0.0000397263 -0.0000013941 -0.0000008079 0.0000005923 0.0000011892 0.0000080175 0.0000018424 -0.0000060647 -0.0000066446 -0.0000016465 0.0000028959 0.0000056502 -0.0000023993 -0.0000067581 0.0000009562 0.0000505030 0.0000670686 -0.0000394931 0.0000214015 0.0000086912 0.0000018036 0.0000116988 -0.0000059971 -0.0000039064 0.0000039369 0.0000069882 0.0000023423 -0.0000015290 -0.0000168588 0.0001851939 -0.0004685750 -0.0007210483 -0.0001645003 -0.0000880066 -0.0001296672 -0.0000443038 -0.0000340385 0.0000286147 0.0002053544 -0.0002733415 0.0000437286 0.0003449295 0.0000536091 -0.0000471216 0.0000262103 -0.0000485782 -0.0000139961 0.0000315799 -0.0000273125 0.0000108703 -0.0000359505 -0.0000228446 -0.0000295829 -0.0000447436 -0.0000621357 0.0001402478 -0.0000072591 -0.0000488166 0.0000519622 -0.0001019256 0.0000067583 0.0000257814 0.0000922248 0.0000112196 0.0000823836 0.0000153696 -0.0000087362 0.0000028811 0.0000011029 -0.0000271519 -0.0000309559 0.0000055678 -0.0000008596 0.0000022667 -0.0000100950 0.0000045174 -0.0000015401 0.0000042931 -0.0000007917 0.0000013502 0.0000082187 0.0000123942 0.0000160029 -0.0000885340 0.0003240414 0.0003407242 -0.0000394480 -0.0000155972 -0.0000365630 0.0000159820 0.0000013252 0.0000090988 -0.0000186853 0.0000126943 0.0000119290 -0.0001733222 -0.0001039975 -0.0001987289 -0.0000221894 -0.0000592609 -0.0001255708 -0.0000246271 -0.0000018133 0.0000413263 -0.0000187585 -0.0000105480 -0.0000062781 0.0000089364 -0.0000047893 -0.0000292359 -0.0000101063 -0.0000123791 -0.0000160250 0.0001069686 0.0005305758 0.0013695801 0.0003803572 0.0000848464 -0.0003510619 0.0000245687 0.0000141855 0.0000086326 0.0000108075 0.0000977177 0.0002975698 -0.0000844407 0.0000119504 0.0001163467 -0.0000056590 -0.0000018567 0.0000003562 -0.0000102672 -0.0000026387 -0.0000036823 -0.0000060791 -0.0000061213 -0.0000072021 -0.0000115599 -0.0000034684 0.0000012811 0.0001492420 0.0000336108 -0.0000469431 -0.0001471190 0.0000827116 -0.0001301942 0.0003625898 -0.0033366758 0.0012712014 -0.0076480953 -0.0031119556 0.0024872878 0.0008940720 0.0350131883 -0.0140721475 0.0839682874 0.0362069013 -0.0281130119 0.0000515984 -0.0038697010 0.0013421641 -0.0031186883 0.0025345015 -0.0003885278 0.0016693712 0.0451515878 -0.0170062925 0.0367804196 -0.0250900433 0.0026377448 -0.0002562211 -0.0003963566 -0.0001014278 0.0007449464 -0.0002024288 0.0013420721 0.0038133515 0.0161726981 -0.0061828941 -0.0242070602 -0.0302431880 -0.0150139788 -0.0342567641 -0.1899796463 0.0927264630 0.2726465669 0.3160193895 0.1886242503 0.0078235424 0.0284694963 -0.0115837073 -0.0328424873 0.0129678664 -0.0611236906 -0.0600956376 -0.2926829460 0.1511271459 0.3574523310 -0.1524260577 0.6754474333 -0.0000204194 0.0000141784 0.0000002173 0.0000001181 -0.0000268825 -0.0000396391 0.0002290208 -0.0001063183 -0.0000278371 0.0000261289 -0.0000621401 0.0000728855 -0.0000146061 -0.0000292301 0.0000120199 -0.0000525783 0.0000290973 -0.0000946527 0.0002217483 0.0002040651 -0.0001686913 0.0000359818 0.0001160270 0.0000972156 -0.0000005391 -0.0000027839 0.0000010523 0.0000009477 -0.0000495485 0.0000185002 0.0000010464 0.0000060445 -0.0000020636 -0.0000025722 0.0000018353 -0.0000004640 0.0000096164 0.0000037260 -0.0000024809 0.0000037965 -0.0000014232 0.0000057990 -0.0000013412 -0.0000011681 -0.0000010954 -0.0000014139 -0.0000057351 0.0000047253 -0.0000000916 0.0000009833 -0.0000014368 0.0000209001 0.0000677550 -0.0000396750 -0.0000074708 0.0000034667 -0.0000027434 -0.0000095583 -0.0000021737 0.0000023811 0.0000087446 -0.0000006118 -0.0000019837 -0.0000095975 -0.0000003237 0.0000032133 -0.0000061653 -0.0000024304 -0.0000003384 0.0008873284 -0.0020662809 -0.0006259594 -0.0002585017 0.0003053419 0.0002519435 0.0000594454 0.0000085597 -0.0000329004 0.0000652480 -0.0000021218 -0.0000704393 -0.0006941637 -0.0001510420 0.0003688049 -0.0002722901 -0.0005666960 -0.0000196674 0.0005806332 0.0001816961 -0.0003082672 0.0000151569 -0.0000406836 -0.0000163671 0.0078096008 0.0017574870 -0.0041063904 0.0030318370 0.0067423795 0.0003906375 -0.0073009235 -0.0016971860 0.0041187733 0.0000073747 0.0004283381 0.0001147469 0.0034377454 0.0044559968 0.0005530768 -0.0436055364 -0.0532293687 -0.0041143984 0.0023767974 0.0009223731 -0.0008685432 -0.0191775066 0.0425898337 0.0140158852 -0.0155139739 -0.0312723412 0.0017899823 -0.0332440275 -0.0021901997 0.0149945160 0.0109920785 0.0126655117 -0.0032603966 -0.0497131362 -0.0012163949 0.0205474719 0.1891438220 0.3297738735 -0.0307748866 0.3849431496 0.0161828115 -0.1741557529 -0.0949261354 -0.1560509162 0.0228120044 0.5420970003 0.0076862438 -0.2243155032 0.2244209673 -0.4572244739 -0.1574564197 -0.0000295657 -0.0000035087 -0.0000039930 0.0004728267 0.0000635723 -0.0000075051 0.0000007411 -0.0000001913 0.0000003166 -0.0000341754 -0.0000512884 -0.0001445119 -0.0001744130 0.0001340028 0.0001498589 -0.0000116370 -0.0000075121 -0.0000391612 0.0000397136 -0.0000002029 0.0000201749 -0.0000125909 0.0000055831 0.0000202018 0.0004866747 -0.0008884519 -0.0001842797 0.0000083060 -0.0000342256 0.0000199846 0.0001352543 -0.0000429760 -0.0000373640 -0.0006759360 0.0000697295 0.0000456284 0.0000726406 -0.0001547197 -0.0001982913 -0.0000894952 -0.0000154122 -0.0000215200 0.0000733272 0.0001000207 -0.0001103583 -0.0065756079 0.0092544988 -0.0014159360 -0.0028555391 -0.0006919818 0.0000856711 0.0005936604 0.0021947938 0.0022695393 -0.0002401482 0.0002640819 0.0000097416 -0.0000075858 -0.0000282738 -0.0000179617 0.0000395874 0.0001550183 -0.0003088917 -0.0001207995 -0.0005476568 0.0007917253 0.0060388360 -0.0000303787 -0.0027700014 0.0018498456 0.0000461740 0.0017849344 0.0000065578 -0.0000036715 0.0000022087 0.0000029263 -0.0000689486 -0.0000775575 0.0002146304 0.0000968958 0.0002010566 -0.0000101654 -0.0000044180 -0.0000056769 -0.0000170057 0.0000278715 0.0000298243 0.0000730028 0.0000317017 0.0000746757 -0.0002649861 0.0008979424 0.0008123850 -0.0024873593 -0.0011354917 -0.0022588617 0.0000637805 -0.0000565815 -0.0000721405 0.0001493141 -0.0002632718 -0.0002716433 -0.0008116525 -0.0003243976 -0.0008242466 -0.0000006143 -0.0000048959 -0.0000176168 -0.0000244711 -0.0000047755 0.0000223712 -0.0000006998 -0.0000005358 -0.0000019752 -0.0000005071 -0.0000026724 -0.0000095838 -0.0000104454 -0.0000021112 0.0000095756 0.0000211046 0.0000640767 0.0002081392 0.0002909343 0.0000476062 -0.0002339277 0.0000016371 -0.0000049135 -0.0000037014 0.0000161918 0.0000259203 0.0001141601 0.0001253751 0.0000266279 -0.0001068032 -0.0000126312 0.0000376541 0.0000292146 -0.0000187092 -0.0000166837 0.0000253795 0.0000004652 0.0000017945 0.0000029200 -0.0000018666 0.0000024989 0.0000007440 -0.0000010843 -0.0000017482 0.0000005199 0.0000078348 -0.0000033460 -0.0000003682 0.0000010647 0.0000060805 -0.0000026787 -0.0000065354 -0.0000071290 0.0000036660 -0.0000013966 -0.0000677852 0.0000257953 0.0000653938 0.0000357193 -0.0000255532 0.0000137543 0.0002016694 -0.0000763869 -0.0000825678 0.0000429462 -0.0000012052 -0.0000970995 -0.0022778004 0.0008642670 0.0008157435 -0.0005328154 0.0000504048 0.0000017193 0.0000010875 0.0000005631 -0.0000008620 0.0000004459 -0.0000022340 -0.0000055162 -0.0000227932 0.0000080380 0.0000308108 0.0000388720 0.0000189228 0.0000521213 0.0002717198 -0.0001292789 -0.0003475642 -0.0004031583 -0.0002407374 -0.0000127631 -0.0000476714 0.0000203830 0.0000458959 -0.0000174647 0.0000851077 0.0001043618 0.0004985613 -0.0002558595 -0.0004988808 0.0002141546 -0.0009439815 -0.0005558991 0.0002669585 -0.0000089214 -0.0000733689 0.0000655213 -0.0001160162 0.0064366965 -0.0031352876 -0.0007827493 0.0003531711 -0.0008060327 0.0011713649 -0.0000257252 -0.0000719876 0.0000154832 -0.0001199891 0.0000815909 -0.0001643727 0.0004142555 0.0004060693 -0.0003003329 0.0000687075 0.0003873445 0.0003388333 0.0000042854 0.0000019643 -0.0000016289 0.0000150782 0.0001505533 -0.0000567028 -0.0000023520 -0.0000116815 0.0000051464 0.0000069283 -0.0000011522 -0.0000010246 -0.0000334262 -0.0000126864 0.0000081014 -0.0000136401 0.0000031728 -0.0000271980 0.0000037153 0.0000011266 0.0000052793 0.0000044698 0.0000218599 -0.0000146324 0.0000004801 -0.0000020190 0.0000086509 -0.0000624111 -0.0002548889 0.0001578380 0.0000273788 -0.0000157032 0.0000263674 0.0000317121 0.0000279664 0.0000344126 -0.0000268200 0.0000007922 -0.0000904239 -0.0000178082 -0.0000003680 0.0000388100 0.0001333255 0.0001076115 0.0001244040 -0.0000584066 0.0000151463 -0.0000891197 -0.1256320665 0.2098399637 0.1488606714 0.0083819194 -0.0219139513 -0.0126606208 -0.0004871388 -0.0008182179 0.0001047216 0.0678262871 0.0159421970 -0.0356048064 0.0113225647 0.0284290490 0.0027399372 0.0088026118 0.0010384738 -0.0054267720 -0.0014494628 0.0033403847 0.0020174252 -0.7626032632 -0.1717228492 0.4009815949 -0.1429998883 -0.3211808762 -0.0195599814 -0.0947429393 -0.0220468385 0.0548007026 0.0002118033 0.0001366238 -0.0001147508 -0.0022595277 -0.0027452667 -0.0000927442 0.0246865147 0.0306601903 0.0023817240 0.0000113038 0.0000878370 -0.0000033380 -0.0001746490 0.0004282955 0.0001335800 -0.0003229094 -0.0006006204 0.0000483052 -0.0003331915 0.0000019407 0.0001532474 0.0000673443 0.0000556506 -0.0000227179 -0.0006355342 -0.0000068489 0.0002665730 0.0037872117 0.0064698596 -0.0006770139 0.0038759911 0.0001914547 -0.0017459505 -0.0004620366 -0.0007587055 0.0001061248 0.0069889746 0.0000639055 -0.0029030791 0.0021972079 -0.0044985223 -0.0015507398 -0.0002020890 -0.0004105104 -0.0001431078 0.0032109861 -0.0021045293 -0.0013217137 0.0000005541 -0.0000055809 -0.0000370811 0.0000013394 -0.0000001033 -0.0000116561 0.0000087209 0.0000337981 0.0000275702 -0.0000234884 -0.0000153835 -0.0000042707 0.0000134766 0.0000021676 -0.0000000922 -0.0000056007 0.0000431663 0.0000731061 -0.0000031842 -0.0000307069 -0.0000102257 0.0000049208 0.0000017126 -0.0000026803 0.0000071067 -0.0000063724 -0.0000104154 0.0000056285 0.0000064542 0.0000144566 0.0001796395 -0.0004925731 -0.0007767572 -0.0002241504 -0.0000878754 -0.0000827616 0.0000451240 0.0000627496 -0.0000577216 -0.0001659970 0.0002738593 -0.0000178303 0.0000281554 -0.0000339810 -0.0000221568 0.0001191406 0.0001130058 0.0001515545 -0.0000181569 0.0000344293 -0.0000000004 -0.0000777621 -0.0000473079 -0.0000143559 -0.0000052253 -0.0000195193 0.0000511767 0.0000074117 -0.0000272263 0.0000242328 0.0000357662 -0.0000076164 -0.0000183645 -0.0001083746 -0.0000017600 -0.0001286035 0.0000016335 0.0000002725 0.0000046077 0.0000201193 -0.0000547169 -0.0000565732 -0.0000375456 -0.0000141310 -0.0000315581 -0.0000037411 0.0000034611 0.0000027236 0.0000036997 -0.0000047005 -0.0000028089 -0.0000204553 -0.0000069768 -0.0000181372 -0.0002057305 0.0005442861 0.0006182807 0.0004189420 0.0001801892 0.0003448736 0.0000125482 -0.0000021736 -0.0000014397 -0.0000121222 0.0000621568 0.0000619660 0.0002202622 0.0000910253 0.0002245087 -0.0000159082 -0.0000076582 0.0000046288 -0.0000337214 0.0000053017 0.0000482229 0.0000338956 -0.0000202238 -0.0000252300 0.0000767609 0.0002012240 0.0006202760 -0.0002227608 -0.0000691890 0.0001751751 -0.0000031251 0.0000002754 0.0000387056 0.0004207755 0.0001002217 -0.0002865337 0.0001209230 0.0000334465 -0.0000192153 -0.0008223586 -0.0020619468 -0.0071443206 0.0020875161 0.0006012078 -0.0019592170 -0.0000043579 0.0000014897 0.0000027605 -0.0000062544 -0.0000013754 0.0000002899 -0.0000444564 0.0000307356 -0.0000293109 -0.0000759525 0.0000173611 0.0000229692 0.0000018579 0.0000015870 -0.0000007756 -0.0000039324 -0.0000007165 0.0000005238 0.0000011633 -0.0000246347 0.0000096804 -0.0000376892 -0.0000153491 0.0000124135 0.0000088960 0.0002610442 -0.0001007660 0.0004233785 0.0001812766 -0.0001376835 0.0000007084 -0.0000314218 0.0000116458 -0.0000203927 0.0000165019 -0.0000023862 0.0000163925 0.0003702946 -0.0001461612 0.0002511126 -0.0001697164 0.0000206526 -0.0000020566 -0.0000005422 -0.0000026012 0.0000007565 -0.0000019559 0.0000027098 0.0000096727 0.0000524563 -0.0000239108 -0.0000096450 -0.0000154043 -0.0000032683 -0.0001100761 -0.0006068918 0.0002953922 0.0001223358 0.0001413693 0.0000843016 0.0000107035 0.0000439414 -0.0000201256 -0.0000305771 0.0000103316 -0.0000552577 -0.0000961607 -0.0004705444 0.0002422390 0.0003298735 -0.0001413500 0.0006235758 -0.0000421393 0.0001709658 0.0002384150 -0.0001484713 -0.0018403229 -0.0024611944 0.0009287661 -0.0004642312 -0.0001054643 -0.0000699335 0.0002851964 -0.0003900102 -0.0000310940 -0.0000839883 0.0000525874 -0.0002389785 0.0001239318 -0.0004254032 0.0006112909 0.0005768374 -0.0004561332 0.0001189741 0.0002988875 0.0002572302 0.0000597680 0.0000765927 -0.0000467494 0.0000619460 -0.0055937478 0.0021483009 -0.0000853508 0.0004554534 -0.0001670565 0.0001140826 -0.0003792888 0.0001293413 0.0000478207 -0.0000664746 0.0000067794 0.0000423381 0.0000709062 0.0000301501 -0.0001276637 -0.0000099480 0.0000566869 -0.0000128251 0.0000280163 -0.0000453484 0.0000074536 -0.0000324004 0.0000203170 -0.0001350754 -0.0004972595 0.0002890856 -0.0000270607 0.0000276988 -0.0000207364 0.0000981678 0.0000626721 0.0000033693 -0.0000075768 -0.0000494238 -0.0000086118 0.0000107395 0.0000202763 -0.0000067752 0.0000064818 0.0000169071 0.0000054868 0.0000568623 0.0000964527 -0.0000103410 -0.0000249475 0.0000354030 0.0000377626 0.0000003652 -0.0000036150 -0.0000012613 0.0000007986 -0.0000024850 -0.0000017688 -0.0000335820 -0.0000051544 0.0000189209 0.0000244231 0.0000563187 0.0000048305 0.0000395553 0.0000070837 -0.0000228136 -0.0000044278 -0.0000122419 -0.0000016015 0.0003675800 0.0000575883 -0.0002067117 -0.0002819439 -0.0006133444 -0.0000319744 -0.0004405856 -0.0001077993 0.0002540956 -0.0000065920 -0.0000064205 0.0000030904 0.0000543203 0.0000668662 0.0000057699 -0.0006295574 -0.0007702487 -0.0000563083 0.0000091239 0.0000012772 -0.0000040769 -0.0000281242 0.0000714477 0.0000212885 -0.0000553879 -0.0001069420 0.0000069240 -0.0001195398 -0.0000035592 0.0000543791 0.0000052909 -0.0000089074 -0.0000037730 -0.0001239703 0.0000011784 0.0000514497 0.0006685278 0.0011706749 -0.0001115874 0.0013583882 0.0000315076 -0.0006204475 -0.0000050582 0.0000370852 0.0000009839 0.0013648136 0.0000248516 -0.0005688202 0.0003560299 -0.0007274978 -0.0002584477 0.0000445439 0.0000102002 -0.0000002574 -0.0006784637 -0.0000680577 0.0000041097 0.0000031560 0.0000073677 0.0000087544 0.0000001849 0.0000010519 -0.0000003004 -0.0000083621 -0.0000043132 -0.0000000487 0.0000070377 0.0000059845 -0.0000014905 -0.0000030472 -0.0000048322 0.0000063942 -0.0000096537 -0.0000136515 -0.0000199937 0.0000412594 0.0000113206 -0.0000002694 -0.0000025116 -0.0000132536 0.0000107885 0.0000026847 0.0000004020 -0.0000012458 -0.0000212032 -0.0000143072 0.0000231214 -0.0000393249 0.0001207988 0.0002346962 0.0001319846 0.0000344973 0.0000535573 0.0000296801 0.0000553030 -0.0000665905 -0.0000750889 0.0000969243 -0.0000172749 -0.0003876260 -0.0000912485 0.0000786529 -0.0000539857 -0.0001015978 -0.0001207700 -0.0000788719 0.0000864243 -0.0000144734 0.0000750163 0.0000398082 0.0000190573 0.0000448568 0.0000808235 -0.0001872425 0.0000332451 0.0001962406 -0.0001555294 0.0002366744 0.0000048845 -0.0000945107 -0.0000270149 0.0000075197 -0.0000221098 -0.0000239925 0.0000335275 0.0000025172 0.0000744755 -0.0001757290 -0.0001504150 0.0000027086 0.0000234620 0.0000248819 0.0000221690 -0.0000090790 0.0000010897 0.0000067374 -0.0000475961 -0.0000537131 0.0000234059 -0.0000087796 0.0000098841 -0.0006156952 0.0018181012 0.0016460765 -0.0001871582 -0.0001203357 -0.0002220056 -0.0000315316 0.0000083424 0.0000011557 -0.0001737078 0.0005302603 0.0005281874 -0.0000854282 0.0000074553 -0.0000480753 -0.0000045545 -0.0000127881 -0.0000330231 -0.0000360560 -0.0000080149 0.0000345453 -0.0000014747 -0.0000020475 -0.0000029757 -0.0000012790 0.0000125302 0.0000439164 0.0000981531 0.0000239658 -0.0000930179 0.0000337211 0.0001389610 0.0003977382 0.0004261122 0.0000955934 -0.0003541244 0.0000036442 0.0000001664 0.0000014992 -0.0000440393 -0.0001854443 -0.0005080977 -0.0011286083 -0.0003115329 0.0010354030 0.0000102901 -0.0000051394 -0.0000062131 0.0000131092 0.0000002588 0.0000030261 -0.0000006371 0.0000000465 0.0000002554 -0.0000027552 0.0000004477 0.0000008690 -0.0003024391 0.0002436423 -0.0000796332 -0.0025060818 0.0013407788 -0.0000104311 -0.0008513627 0.0076051273 -0.0028725486 0.0179572341 0.0090931813 -0.0065025605 -0.0016543961 -0.0775584536 0.0310656814 -0.1977828903 -0.0873969402 0.0670583454 -0.0055686769 -0.0713867931 0.0273241357 0.0359872144 -0.0204699432 0.0011162967 0.0370591296 0.8022933207 -0.3071092333 -0.3674082791 0.2419358161 -0.0234319248 -0.0002385321 0.0000020966 0.0002934394 0.0000053530 0.0001151090 -0.0000620391 -0.0002282003 -0.0008764784 0.0006797163 -0.0003715298 -0.0002631227 -0.0003214389 0.0020501123 0.0093105509 -0.0048834859 0.0033358817 0.0037114299 0.0022787230 0.0000735125 0.0001009100 0.0000093772 -0.0001677424 0.0000175710 -0.0002782119 -0.0002144268 -0.0010632331 0.0005510624 0.0015930887 -0.0007183695 0.0029970424 -0.0000005064 -0.0000067735 -0.0000047877 0.0000040687 0.0000637776 0.0000828708 -0.0000027571 0.0000047651 0.0000060813 -0.0000031263 0.0000263721 -0.0000221122 0.0000090728 0.0000065858 -0.0000041457 -0.0000285887 0.0000133129 -0.0000257937 -0.0001102621 -0.0000970287 0.0000759776 0.0000043143 0.0000070347 0.0000139712 0.0000039586 -0.0000024223 0.0000015994 0.0000192390 0.0001052784 -0.0000379856 -0.0000009642 -0.0000053391 0.0000026482 0.0000018496 0.0000007939 -0.0000002782 -0.0000078666 -0.0000043069 0.0000026128 -0.0000002936 0.0000000988 0.0000005782 -0.0000007293 -0.0000018469 0.0000003557 -0.0000013837 -0.0000068081 0.0000037927 -0.0000001254 -0.0000002837 -0.0000009057 0.0000181299 0.0000837940 -0.0000535996 -0.0000004101 0.0000022130 -0.0000015428 0.0000041857 0.0000054919 -0.0000040733 -0.0000018616 -0.0000048489 0.0000053324 0.0000039580 0.0000034663 -0.0000056477 -0.0000012991 0.0000085779 -0.0000035407 -0.0000167558 0.0046894539 0.0006430805 0.0042153988 -0.0066813188 -0.0048530581 -0.0004007434 0.0006199659 0.0004569355 -0.0001140046 -0.0000703371 0.0000735596 -0.0005592786 -0.0001684593 0.0002808271 0.0005814151 0.0012341774 0.0000553000 -0.0002826709 -0.0001526903 0.0001237230 -0.0000010962 -0.0000113857 -0.0000089574 0.0061989256 0.0014269095 -0.0032602656 -0.0063450584 -0.0140154828 -0.0007986929 0.0043323785 0.0009509172 -0.0024151574 -0.0001897772 -0.0006563986 -0.0000935479 -0.0048980473 -0.0068122292 -0.0007479486 0.0626706669 0.0798861473 0.0065089317 -0.0012233898 -0.0025168105 0.0000789896 -0.0111208067 0.0187406254 0.0072804838 -0.0036444238 -0.0065373758 0.0005309173 0.0645455159 0.0008541145 -0.0295954281 0.0221982988 0.0408526973 -0.0046015320 -0.0133856493 -0.0010335900 0.0054266700 0.0393839579 0.0674973636 -0.0066622938 -0.7282777351 -0.0273811885 0.3302959346 -0.2499379801 -0.4307810541 0.0571656138 0.1421672877 0.0025419383 -0.0587344292 0.1049126211 -0.2075113015 -0.0726587245 0.0000035145 0.0000242702 0.0000170652 -0.0000221359 -0.0000385721 0.0000044368 0.0000001107 0.0000015445 0.0000037884 -0.0000028075 0.0000269810 0.0000341723 0.0000921662 0.0000282435 -0.0000264398 -0.0000045596 -0.0000360790 0.0000352710 -0.0000479698 0.0000137837 -0.0000074686 0.0000213145 -0.0000115975 -0.0000468823 -0.0005293177 0.0012762473 0.0002788321 -0.0000316022 0.0000332273 -0.0000310787 -0.0000270573 0.0000073397 0.0000182738 0.0000259016 0.0000969465 -0.0001002991 -0.0000674556 0.0002177166 0.0003586467 0.0000341067 0.0000063373 0.0000108848 -0.0001168479 -0.0001266052 0.0001777944 0.0089251122 -0.0123242558 0.0023794803 0.0033549111 0.0006077758 0.0000344173 -0.0006761821 -0.0037413517 -0.0036538960 0.0003175193 -0.0004286444 -0.0000081049 0.0002453963 0.0001109432 0.0000627839 -0.0000115811 -0.0001536581 0.0002279574 -0.0000634748 -0.0012789052 0.0014835347 -0.0002379548 0.0000244867 0.0000393208 0.0000813560 0.0001486220 -0.0000881746 -0.0000008080 -0.0000094470 -0.0000090016 -0.0000358904 0.0002077279 0.0002131820 -0.0006194161 -0.0002940582 -0.0005996728 -0.0000195789 0.0000255673 0.0000823077 0.0000047420 -0.0000014086 -0.0000034754 0.0000642263 0.0000345763 0.0000695307 0.0007472857 -0.0025977563 -0.0023555467 0.0071442855 0.0031651013 0.0064159632 0.0000684543 -0.0001244038 -0.0002500001 0.0000181110 0.0000640350 0.0001324964 -0.0008161263 -0.0003351553 -0.0008080605 0.0000002937 0.0000055682 0.0000180633 0.0000283749 0.0000059794 -0.0000262541 0.0000004113 0.0000003211 0.0000036366 -0.0000050681 -0.0000032056 -0.0000058998 0.0000744073 0.0000194841 -0.0000666975 -0.0000175574 -0.0000713921 -0.0002097893 -0.0003352237 -0.0000722690 0.0002808458 -0.0000015615 0.0000027466 0.0000045564 0.0000166990 0.0000094675 0.0000427377 -0.0008303580 -0.0002219895 0.0007453535 -0.0000187478 0.0001077463 0.0000823350 0.0001200082 0.0001330556 0.0000103242 -0.0000008330 0.0000011332 -0.0000047706 0.0000017577 -0.0000003601 -0.0000011426 -0.0000008797 -0.0000000453 -0.0000001472 -0.0000029687 0.0000011647 -0.0000002093 -0.0000011090 0.0000101694 -0.0000036743 0.0000262966 0.0000131602 -0.0000092682 0.0000013079 -0.0000883596 0.0000378744 -0.0002973975 -0.0001257939 0.0001009623 -0.0000034886 -0.0000458797 0.0000172389 0.0000371730 -0.0000235972 0.0000020311 0.0000154441 0.0005091412 -0.0001857711 -0.0004083664 0.0002725790 -0.0000273662 0.0000006571 0.0000011209 0.0000003212 -0.0000000801 0.0000002958 -0.0000006961 -0.0000004314 -0.0000010253 -0.0000005754 0.0000045078 0.0000053184 0.0000024659 0.0000003988 0.0000059394 0.0000036027 -0.0000488873 -0.0000565628 -0.0000312557 -0.0000017750 -0.0000075429 0.0000029282 0.0000078500 -0.0000031054 0.0000139834 0.0000148299 0.0000791848 -0.0000429199 -0.0000853322 0.0000346107 -0.0001598904 -0.0000546088 0.0001893787 0.0002684978 -0.0000178085 -0.0019383302 -0.0023711498 0.0013459561 -0.0006360091 -0.0000094222 -0.0000829073 0.0002324638 -0.0004291120 -0.0000113964 -0.0000044940 0.0000013176 -0.0000007977 0.0000177822 0.0000391028 0.0000156703 0.0001238617 -0.0000771678 -0.0000168756 -0.0000421470 -0.0000354725 -0.0000001565 0.0000011103 0.0000003192 -0.0000022212 0.0000343206 -0.0000158429 -0.0000001608 -0.0000033210 0.0000011134 0.0000004281 -0.0000004842 -0.0000000962 -0.0000018063 -0.0000004320 0.0000001211 -0.0000056156 0.0000001560 -0.0000075622 0.0000022617 0.0000017191 0.0000006052 -0.0000009389 0.0000035640 -0.0000041310 -0.0000000694 -0.0000042085 -0.0000024551 -0.0000059719 -0.0000470773 0.0000211813 0.0000016676 0.0000065056 0.0000063275 0.0000021817 0.0000034198 0.0000057006 -0.0000037369 -0.0000030008 -0.0000096803 -0.0000056040 -0.0000028533 0.0000179951 0.0000266404 0.0000143994 0.0000136493 0.0086075958 0.0187304007 0.0045409624 -0.0716779558 0.1133356771 0.0824809454 0.0070922042 -0.0103247939 -0.0078690978 0.0000161644 0.0008648171 0.0001508807 0.0088262843 0.0027276277 -0.0043900262 -0.0117924205 -0.0249250174 -0.0011467577 0.0006320904 0.0013100572 0.0000654827 -0.0001147412 0.0003231863 0.0001637997 -0.0964321390 -0.0224819803 0.0504633142 0.1269691587 0.2801634524 0.0157147088 -0.0183542795 -0.0042907699 0.0094224299 -0.0026381512 -0.0022732021 0.0013175145 0.0514056226 0.0624454247 0.0035918399 -0.5766323503 -0.7114088882 -0.0551349853 0.0000546891 -0.0021467277 -0.0002604928 -0.0006824601 0.0004183077 0.0003406170 0.0027216245 0.0046743427 -0.0005002870 0.0082828549 -0.0002859435 -0.0038409225 0.0019785720 0.0038787258 -0.0003723358 0.0013732919 -0.0001367708 -0.0006471948 -0.0319796480 -0.0522588148 0.0065340200 -0.0929553145 -0.0037137600 0.0419096915 -0.0231830273 -0.0401773486 0.0053537969 -0.0165748942 0.0003878288 0.0070217532 0.0036612312 -0.0067299598 -0.0023524287 0.0001981002 -0.0000253449 -0.0000425002 -0.0029384969 -0.0005393638 -0.0001113452 0.0000046148 0.0000195851 0.0000531694 -0.0001689305 -0.0003604828 -0.0006783708 0.0000848719 0.0007983864 0.0003401956 -0.0003580251 -0.0003106665 -0.0000345793 0.0000868565 0.0000478953 -0.0000310822 -0.0000061480 0.0000566946 0.0000731936 -0.0001320183 0.0001999777 0.0000740918 -0.0000007706 0.0000045797 -0.0000137491 0.0001682089 -0.0001270379 -0.0001243100 -0.0001184144 0.0001280780 0.0001447531 0.0002190469 -0.0005524230 -0.0008823990 -0.0005116187 -0.0001252511 -0.0001629456 0.0000401300 -0.0001666131 0.0002074343 0.0014980440 -0.0022087756 0.0002972317 0.0008914352 0.0002095472 0.0001430522 -0.0003855441 -0.0006815493 -0.0007765501 0.0000458002 0.0000004980 -0.0000271283 -0.0002573327 -0.0001890436 -0.0000841842 -0.0000265424 -0.0000764739 0.0003792003 -0.0000703109 -0.0005672815 0.0000478810 0.0018465850 -0.0001438224 -0.0008017650 -0.0004547093 -0.0002189620 -0.0006069327 -0.0000048707 -0.0000020149 -0.0000057276 -0.0000194982 0.0000914960 0.0000895140 -0.0001063220 -0.0000494161 -0.0001041597 0.0000006643 0.0000009149 0.0000092113 0.0000004044 0.0000038514 0.0000045260 -0.0000070594 -0.0000025946 -0.0000062391 0.0003088033 -0.0010671804 -0.0009733614 0.0012010523 0.0005009552 0.0011391941 -0.0000137127 -0.0000243801 -0.0000468508 0.0000159082 -0.0000457001 -0.0000507428 0.0000807639 0.0000354784 0.0000756111 -0.0000078081 -0.0000397387 -0.0001199423 -0.0000848256 -0.0000206155 0.0000733506 0.0000222724 0.0000208998 -0.0000355693 0.0000128156 0.0002045646 0.0007185851 0.0010209065 0.0002588604 -0.0009378207 0.0001382915 0.0004979948 0.0014278956 0.0010188875 0.0001861484 -0.0008698720 -0.0000097725 -0.0000595169 -0.0000843195 -0.0008878669 -0.0026705957 -0.0082801553 -0.0117735969 -0.0031689011 0.0106258523 -0.0000006198 0.0000153827 0.0000168728 0.0000268242 0.0000254769 0.0000082921 0.0000334273 -0.0000211681 0.0000855765 -0.0000096102 0.0000024084 0.0000178405 0.0000005831 -0.0000000437 -0.0000001194 0.0000006862 -0.0000004312 -0.0000010671 0.0000004563 -0.0000110588 0.0000043138 -0.0000141076 -0.0000059126 0.0000046935 0.0000011797 0.0001206919 -0.0000506617 0.0001533029 0.0000685208 -0.0000541578 0.0000027270 0.0000312851 -0.0000127634 -0.0000104412 0.0000056801 -0.0000002523 -0.0000199856 -0.0003485563 0.0001385199 0.0000995731 -0.0000638605 0.0000047298 -0.0000031348 -0.0000037174 -0.0000037209 -0.0000000290 -0.0000001565 0.0000018691 0.0000241390 0.0001500397 -0.0000755834 0.0000211899 0.0000173527 0.0000204355 -0.0002966772 -0.0016986693 0.0008436092 -0.0001906817 -0.0002105092 -0.0001403198 0.0000010869 0.0000055136 -0.0000023016 -0.0000054977 0.0000004417 -0.0000084556 -0.0000083554 -0.0000525966 0.0000264001 0.0000629245 -0.0000184528 0.0001093740 -0.0001395158 -0.0011320748 -0.0018943124 -0.0001281184 0.0136540141 0.0165266155 -0.0034977101 0.0010821063 -0.0004020884 0.0006030112 -0.0022872144 0.0035894707 -0.0001475199 -0.0002520726 0.0001158872 -0.0002743204 0.0000275975 -0.0000926894 0.0016958617 0.0027217345 -0.0019119579 0.0001502710 0.0009813572 0.0010897460 -0.0000029695 -0.0000000243 0.0000008515 -0.0000124952 -0.0000891027 0.0000368893 0.0000002997 0.0000057362 -0.0000021831 -0.0000020792 0.0000057754 0.0000052461 0.0000311282 0.0000173878 -0.0000054865 0.0002001690 0.0000369411 0.0002589110 -0.0000526803 0.0000053535 -0.0000411208 0.0001513335 0.0001654469 -0.0000125231 -0.0000731705 0.0001321257 0.0002696336 -0.0004053098 -0.0008993087 0.0005447749 0.0000306182 -0.0003306874 -0.0001780869 -0.0000008024 -0.0000511255 -0.0000216218 -0.0000892676 0.0000621367 0.0000311006 0.0000457924 0.0000154662 -0.0000355542 0.0000221402 -0.0000218452 0.0000048104 0.0003600204 0.0008805239 0.0002240238 0.0064541645 -0.0101661978 -0.0074438207 -0.0007376184 0.0009511577 0.0007529590 -0.0000432726 -0.0000897737 -0.0000212500 -0.0013167496 -0.0003737296 0.0006692642 0.0018146873 0.0040089211 0.0002421638 0.0017178103 0.0002549910 -0.0010310932 0.0000152042 -0.0000888111 -0.0000367678 0.0144494095 0.0033489829 -0.0076447475 -0.0200302278 -0.0445382336 -0.0025480219 -0.0186205514 -0.0042732470 0.0107541615 -0.0001190965 -0.0000854781 0.0000653549 0.0022008548 0.0026565613 0.0001358701 -0.0245694072 -0.0303118618 -0.0023351882 0.0000010295 -0.0000912270 -0.0000098023 -0.0000242704 0.0000077194 0.0000110435 0.0001107680 0.0001911441 -0.0000206393 0.0003463525 -0.0000117767 -0.0001603200 0.0000795521 0.0001579158 -0.0000146439 0.0000707654 -0.0000041618 -0.0000325643 -0.0012925821 -0.0021165730 0.0002670390 -0.0038993068 -0.0001728549 0.0017563308 -0.0009522226 -0.0016424295 0.0002230304 -0.0008404069 0.0000129161 0.0003560795 0.0000962951 -0.0001713451 -0.0000582426 0.0001089486 0.0000205183 0.0000000632 -0.0016922864 -0.0000087483 0.0000251415 -0.0003902825 -0.0013639361 -0.0034319093 -0.0000044517 -0.0000083884 -0.0000166932 0.0000012214 0.0000156048 0.0000033942 -0.0000065082 -0.0000050037 -0.0000007044 0.0000006053 -0.0000026339 0.0000018455 -0.0000132182 0.0000046885 0.0000120021 0.0000122381 0.0000202560 0.0000065585 -0.0000011841 0.0000010916 -0.0000004279 0.0000025723 -0.0000014719 0.0000000981 -0.0000007026 0.0000021490 -0.0000013526 -0.0000081128 -0.0001772355 -0.0000233371 0.0000650122 0.0000277201 0.0000378712 0.0000818356 0.0000758844 -0.0001772460 0.0000744402 -0.0001154150 0.0000016247 -0.0001359269 -0.0000133488 0.0000431209 -0.0000763041 -0.0000944909 -0.0001221343 -0.0000081379 0.0000093054 0.0000035503 0.0000081163 0.0000018576 0.0000031426 0.0000014460 -0.0000042104 -0.0000061368 -0.0000061117 -0.0000231199 0.0000072283 0.0000042016 -0.0000031917 -0.0000033973 0.0000080590 -0.0000069945 0.0000066586 -0.0000080897 -0.0000023434 -0.0000093125 -0.0000522193 0.0001756305 0.0001671754 -0.0000511834 -0.0000322506 -0.0000590367 0.0000020989 0.0000005849 0.0000011275 -0.0000047958 0.0000125014 0.0000120627 0.0000072349 0.0000010982 0.0000048505 0.0006176919 -0.0019784231 -0.0018514704 0.0006727240 0.0003024671 0.0006500415 -0.0000083444 -0.0000007871 -0.0000030483 0.0000505469 -0.0001459881 -0.0001434235 -0.0000669934 -0.0000246031 -0.0000614682 0.0004934536 0.0003574779 0.0005020257 -0.0020840382 -0.0003850042 0.0020386018 -0.0005692058 -0.0002887930 0.0001613000 0.0012208987 -0.0060094789 -0.0226976209 -0.0607522773 -0.0155655421 0.0555609857 -0.0011697863 -0.0026927658 -0.0070438668 0.0255586364 0.0057744940 -0.0217371505 0.0001247946 -0.0000982468 -0.0003178568 0.0225760337 0.0895601518 0.2691260332 0.6927756771 0.1867263757 -0.6248643626 0.0000022610 -0.0000000245 -0.0000003101 0.0000042598 0.0000023628 0.0000017038 -0.0001867247 -0.0000148803 0.0001482761 -0.0000189172 0.0000166783 0.0000366542 -0.0000004778 -0.0000019546 0.0000006696 0.0000014771 0.0000031910 -0.0000017649 -0.0000015233 0.0000205861 -0.0000076677 0.0000330161 0.0000155710 -0.0000112946 -0.0000072968 -0.0002087675 0.0000845341 -0.0003731958 -0.0001610407 0.0001253748 -0.0000100472 -0.0001034228 0.0000406888 0.0000615578 -0.0000352379 0.0000025957 0.0000553916 0.0011686936 -0.0004461339 -0.0006450097 0.0004253330 -0.0000439889 0.0000048277 -0.0000012313 0.0000095386 -0.0000130946 -0.0000324739 -0.0000041919 -0.0000122518 -0.0000708909 0.0000285370 -0.0000022547 0.0000002230 -0.0000035628 0.0001487104 0.0008169831 -0.0003943505 0.0000100450 0.0000237564 0.0000131087 0.0000083832 0.0000122055 0.0000024507 -0.0000127448 0.0000006161 -0.0000193749 -0.0000209433 -0.0000497706 0.0000197914 0.0001156444 -0.0000392089 0.0002148854 -0.0000104794 -0.0000278903 -0.0000594565 -0.0000284955 0.0003676199 0.0004017776 -0.0000723616 0.0000011304 -0.0000277450 0.0000260146 -0.0000909633 0.0001477703 0.0000177638 0.0000243270 0.0000053993 -0.0000433835 0.0000333431 -0.0000971454 -0.0001993896 -0.0001755948 0.0001198108 0.0000196003 -0.0001103404 -0.0001012332 -0.0000005917 0.0000019807 -0.0000002387 -0.0000093849 -0.0001379944 0.0000526604 0.0000005351 0.0000096894 -0.0000038611 0.0000003921 0.0000008440 -0.0000008917 -0.0000056586 -0.0000013709 0.0000011235 -0.0000212723 0.0000014577 -0.0000319387 0.0000045557 -0.0000025053 0.0000061314 -0.0000090471 0.0000021461 -0.0000061062 0.0000084684 -0.0000062400 -0.0000184460 -0.0000129897 -0.0001335613 0.0000952573 0.0000069224 0.0000138979 0.0000173476 0.0000062485 0.0000013097 -0.0000028120 -0.0000088610 -0.0000010714 0.0000065448 0.0000177110 -0.0000051562 0.0000075232 -0.0000100490 -0.0000202702 -0.0000065061 0.0027302000 0.0072421767 0.0021498043 0.1524681838 -0.2399498142 -0.1755455448 -0.0157115810 0.0215225428 0.0169648682 -0.0005745656 -0.0013765793 -0.0003081829 -0.0180962157 -0.0055197837 0.0090597232 0.0294824949 0.0644883377 0.0038365592 0.0235352226 0.0029652882 -0.0143288587 0.0002452688 -0.0010919600 -0.0005078517 0.1972780804 0.0457815601 -0.1033010663 -0.3233351894 -0.7165631061 -0.0411524438 -0.2525726888 -0.0574794314 0.1461369055 -0.0009595665 -0.0006435732 0.0005483450 0.0190287612 0.0229806615 0.0011447910 -0.2126953909 -0.2623887121 -0.0201985783 0.0000282925 -0.0007406833 -0.0000779635 -0.0000482283 -0.0001618175 -0.0000045698 0.0009484576 0.0016187633 -0.0001802626 0.0018655884 -0.0001147787 -0.0008686726 0.0002673892 0.0005904166 -0.0000401967 0.0006078158 -0.0000202543 -0.0002777087 -0.0110018828 -0.0179245869 0.0022953510 -0.0208638445 -0.0009247471 0.0093583030 -0.0033915635 -0.0059288565 0.0007976787 -0.0071572219 0.0001207524 0.0030243729 -0.0004931559 0.0011377988 0.0004084655 0.0002514286 0.0001329879 0.0000457710 -0.0036115845 0.0003262176 -0.0001264713 0.0000327906 0.0001047660 0.0002440871 -0.0000478958 -0.0000793100 -0.0001293737 0.0000215066 0.0001724571 0.0000594148 -0.0000833977 -0.0000788692 -0.0000066648 0.0000150117 0.0000156667 -0.0000153433 0.0000064224 0.0000091404 0.0000116673 -0.0000244351 0.0000710775 0.0000396716 -0.0000035634 0.0000029937 -0.0000031589 0.0000366604 -0.0000296745 -0.0000186298 -0.0000383103 0.0000267367 0.0000251532 0.0000253082 -0.0000703593 -0.0001826693 -0.0001320915 -0.0000315330 -0.0000386715 -0.0000271975 -0.0000901812 0.0001300976 0.0004365782 -0.0006848966 0.0000777656 0.0002036100 0.0000767677 0.0000629670 -0.0002233414 -0.0003451081 -0.0004314006 0.0000538770 -0.0000574057 -0.0000090855 -0.0000288425 -0.0000272785 -0.0000207023 -0.0000199909 -0.0000263672 0.0001421163 -0.0000205693 -0.0001058232 -0.0000421281 0.0004578488 -0.0000273074 -0.0002039156 -0.0000069397 -0.0000580010 -0.0000343798 -0.0000028665 0.0000029444 0.0000011156 0.0000170391 -0.0000438702 -0.0000379065 0.0000297411 0.0000208863 0.0000339764 0.0000046644 -0.0000050493 -0.0000015637 0.0000000560 0.0000033067 0.0000035154 -0.0000221165 -0.0000101924 -0.0000231094 -0.0001676892 0.0005031349 0.0004373054 -0.0004146366 -0.0002288319 -0.0003672538 -0.0000121569 -0.0000080044 -0.0000140034 0.0000170036 -0.0000491138 -0.0000446803 0.0002716259 0.0001120606 0.0002767045 -0.0000411652 0.0000096097 0.0000863036 0.0001912035 0.0000416571 -0.0001814194 0.0000158515 -0.0000210437 0.0000362978 -0.0001495709 0.0002372124 0.0010031671 0.0042806925 0.0011009682 -0.0039011693 -0.0000230092 -0.0002980146 -0.0008831986 -0.0023585747 -0.0005212365 0.0020569937 0.0000695002 0.0001186727 0.0001180544 -0.0007212886 -0.0042167638 -0.0123665186 -0.0486125171 -0.0130931804 0.0438056112 0.0000016227 0.0000048301 0.0000051195 0.0000119389 0.0000090309 0.0000036562 -0.0000616223 0.0000768645 -0.0001514609 -0.0000292096 0.0000115664 -0.0000096168 0.0000009055 -0.0000003757 0.0000003860 0.0000048068 -0.0000034735 0.0000036199 -0.0000000809 0.0000098086 -0.0000039179 -0.0000056397 -0.0000070902 0.0000036112 -0.0000043116 -0.0001362499 0.0000547117 0.0000802957 0.0000289426 -0.0000255117 0.0000054545 0.0000895274 -0.0000319684 -0.0000477725 0.0000279190 -0.0000013340 -0.0000375493 -0.0010088677 0.0003702988 0.0005087622 -0.0003399937 0.0000331924 0.0000067925 0.0000086867 0.0000051806 0.0000018444 0.0000020981 -0.0000009851 -0.0000585274 -0.0003769846 0.0001946497 -0.0000754149 -0.0000704769 -0.0000650587 0.0007365028 0.0042770647 -0.0021489954 0.0007317629 0.0008189461 0.0005219109 0.0000061345 0.0000265531 -0.0000123305 -0.0000149144 0.0000102605 -0.0000308095 -0.0000596194 -0.0003033329 0.0001592372 0.0001584796 -0.0000837856 0.0003130103 -0.0001353641 -0.0001112910 -0.0003702609 -0.0005059459 0.0020259549 0.0017313179 0.0002109048 -0.0004184058 -0.0004206444 0.0001594826 -0.0007480381 0.0013058573 -0.0000353364 0.0000029285 -0.0000244825 0.0003056984 -0.0002359132 0.0006544161 -0.0000429470 0.0001407556 -0.0003476724 0.0002454410 0.0003287067 0.0000116687 0.0000139100 0.0000368878 0.0000007052 0.0000069685 0.0003273168 -0.0001281238 -0.0000345513 -0.0000224533 0.0000201824 -0.0000049182 -0.0000569482 -0.0000730696 0.0000744970 -0.0000685951 0.0000116594 0.0000634014 0.0000706505 0.0000261181 0.0001277744 0.0004720810 -0.0001226701 -0.0001228164 -0.0002155254 0.0000147644 0.0000002053 -0.0000653373 0.0001031273 0.0008569503 0.0026242607 -0.0014244067 0.0000659481 -0.0000305891 0.0000530793 -0.0000214093 -0.0000261711 -0.0000007973 -0.0000191687 0.0000344203 -0.0000011274 0.0000117036 -0.0000123259 -0.0000012615 0.0000060279 -0.0000117058 0.0000105779 -0.0000201199 -0.0000061202 0.0000049994 0.0010061607 -0.0015920871 -0.0011836415 -0.0001007761 0.0001432618 0.0001118860 -0.0000054986 -0.0000067031 0.0000008862 -0.0001397935 -0.0000411381 0.0000720831 0.0001705188 0.0003642789 0.0000196176 0.0000962768 0.0000090571 -0.0000597473 0.0000041472 -0.0000028401 -0.0000051869 0.0015454413 0.0003670341 -0.0008255865 -0.0018418785 -0.0040704591 -0.0002417965 -0.0009998384 -0.0002172978 0.0005748099 0.0000044840 0.0000012563 -0.0000030025 -0.0000011302 0.0000032922 0.0000024258 -0.0000274879 -0.0000274327 -0.0000052246 0.0000000427 0.0000005794 -0.0000000119 0.0000000684 0.0000013231 0.0000002387 0.0000033146 0.0000047480 -0.0000005425 -0.0000117799 -0.0000002115 0.0000054694 -0.0000050427 -0.0000100667 0.0000009455 -0.0000064605 -0.0000005161 0.0000025961 -0.0000392513 -0.0000617329 0.0000065671 0.0001372161 0.0000151525 -0.0000612041 0.0000667570 0.0001123944 -0.0000116358 0.0000732382 0.0000023200 -0.0000299864 0.0000089403 -0.0000153115 -0.0000023540 0.0000167884 -0.0000019636 0.0000004038 -0.0002917342 0.0000169101 -0.0000164404 -0.0000222575 -0.0000258735 -0.0000076738 -0.0000016779 -0.0000020339 -0.0000038769 0.0000019339 0.0000093645 0.0000069975 -0.0000054685 -0.0000060852 -0.0000017872 0.0000022176 0.0000062147 0.0000025051 0.0000084782 -0.0000332057 -0.0000593178 -0.0000127230 0.0000017184 -0.0000008889 0.0000044064 0.0000000144 -0.0000042918 0.0000026025 -0.0000031845 -0.0000037914 0.0000041494 0.0000074398 0.0000003341 -0.0001450691 0.0003813943 0.0005316780 0.0001166293 0.0001050425 0.0000509815 -0.0000856693 -0.0001165263 0.0001544239 0.0000731531 -0.0001050918 0.0000111194 0.0000997457 0.0000396948 0.0000069806 -0.0000234898 0.0000183466 -0.0000149274 -0.0000073606 -0.0000050886 -0.0000021710 -0.0000396315 -0.0000392523 0.0000000221 -0.0000031184 -0.0000134778 0.0000348461 -0.0000088441 -0.0000653910 0.0000493475 -0.0000114585 -0.0000039848 0.0000027819 -0.0000291115 -0.0000038847 -0.0000354065 -0.0000087379 -0.0000081558 -0.0000183173 -0.0001020576 0.0003242100 0.0003026666 -0.0000687733 -0.0000520429 -0.0000880345 -0.0000025194 0.0000034768 0.0000014698 -0.0000089585 0.0000263778 0.0000262696 0.0000242486 0.0000092940 0.0000215733 0.0011407330 -0.0036683260 -0.0033659525 0.0009954109 0.0004664746 0.0009581490 0.0000016942 0.0000004750 0.0000010842 0.0001184431 -0.0002997921 -0.0002920949 -0.0002566617 -0.0001238207 -0.0002380321 0.0000126703 0.0000151394 0.0000141293 0.0000616141 0.0000110991 -0.0000670628 0.0000161356 0.0000113723 0.0000108889 -0.0000071748 -0.0000085943 -0.0000130870 -0.0000219885 0.0000016002 0.0000374985 -0.0000471901 -0.0000442725 -0.0001047495 -0.0007662568 -0.0001699909 0.0006571336 -0.0000243565 -0.0000116476 -0.0000097938 0.0000269258 0.0000703873 0.0001737175 0.0003988577 0.0001004960 -0.0004145373 -0.0000001254 -0.0000008208 -0.0000006272 -0.0000019683 -0.0000000079 0.0000000027 0.0000053840 0.0000062148 0.0000061593 0.0000113496 0.0000026272 -0.0000009988 -0.0000467494 -0.0001235595 0.0000321558 -0.0001321144 0.0000139679 -0.0005222812 0.0000975287 0.0000961277 -0.0000259319 0.0000519812 0.0001421901 -0.0000505426 -0.0000181205 -0.0007638694 0.0003109142 -0.0009985475 -0.0004096303 0.0003638805 0.0000868420 -0.0009590478 0.0000351342 0.0002261501 -0.0003091696 0.0000268081 0.0005185572 0.0112742461 -0.0036512853 -0.0034580082 0.0022720937 -0.0001335436 -0.0017524773 -0.0019529579 -0.0014666386 -0.0001704640 -0.0003273465 0.0001354726 0.0116336653 0.0743553926 -0.0381346091 0.0163824454 0.0156766472 0.0138099848 -0.1461697491 -0.8430463182 0.4209227125 -0.1637493068 -0.1848839867 -0.1162724777 -0.0008766443 -0.0033085772 0.0013654220 0.0031671927 -0.0025844526 0.0069045939 0.0067259548 0.0326117492 -0.0167078218 -0.0368370910 0.0172804311 -0.0709234956 -0.0000026697 0.0000064909 0.0000075284 -0.0000145225 -0.0000573220 -0.0000898191 0.0000553266 -0.0000268171 -0.0000117059 -0.0000101091 0.0000024691 -0.0000011453 0.0000051151 0.0000179153 -0.0000054583 0.0000560728 -0.0000230814 0.0000896672 -0.0000998005 -0.0000999313 0.0000675455 -0.0000339762 -0.0000874259 -0.0000906395 0.0001149559 0.0000274677 0.0002806974 0.0002521640 0.0026453328 -0.0008816593 0.0000783547 -0.0002631820 0.0000656080 0.0000088962 0.0000057622 0.0000028626 0.0000103950 -0.0000890300 0.0000194776 -0.0000500218 0.0000069128 -0.0000875344 0.0000111796 -0.0000029545 0.0000181087 0.0000016065 0.0000220444 -0.0000186751 0.0000088206 -0.0000061478 0.0000148659 -0.0000599830 -0.0002856689 0.0001819966 0.0000763629 -0.0000417052 0.0000992110 0.0001012300 0.0000855769 0.0001111293 -0.0000797684 0.0000363438 -0.0002706770 -0.0000329237 -0.0000459991 0.0001365758 0.0000275781 0.0004608038 0.0004298281 0.0000555412 -0.0001029993 0.0001118406 0.0001406820 -0.0001785393 -0.0001421406 -0.0000194616 0.0000236081 0.0000183683 0.0000277324 0.0000154276 -0.0000145703 0.0000158180 0.0000089558 -0.0000081893 0.0000430829 0.0001086932 0.0000099832 0.0000105084 -0.0000115975 -0.0000126939 -0.0000274102 -0.0000587418 -0.0000023126 -0.0000239926 0.0000933899 0.0001109477 -0.0005364987 -0.0011676381 -0.0000571697 -0.0001491410 -0.0000298778 0.0000966311 0.0000014783 0.0000171895 -0.0000043398 -0.0000478560 -0.0000588010 0.0000066819 0.0005092977 0.0006038326 0.0000330538 0.0000120718 0.0000265882 -0.0000018031 0.0000315545 -0.0000408678 -0.0000186660 0.0000013408 -0.0000043924 -0.0000008348 -0.0006385822 -0.0000198222 0.0002890192 -0.0000703055 -0.0001602842 0.0000106176 0.0000305732 0.0000042525 -0.0000119379 0.0000403410 0.0000653883 -0.0000039564 0.0073545517 0.0002864821 -0.0032982804 0.0008218793 0.0014868119 -0.0001833996 -0.0003099405 -0.0000047744 0.0001313261 -0.0002636097 0.0004928600 0.0001842698 -0.0005718104 -0.0000052485 0.0000208253 0.0096268412 0.0006255948 -0.0008120764 -0.0000012556 0.0000069895 0.0000065764 0.0000007720 -0.0000038486 -0.0000010894 0.0000044989 0.0000003846 -0.0000032721 -0.0000038934 0.0000023071 0.0000001788 0.0000068385 -0.0000086559 -0.0000020538 -0.0000179271 0.0000799698 0.0001514989 0.0000716200 0.0000062559 0.0000090319 -0.0000003972 -0.0000037366 0.0000064158 -0.0000039183 0.0000031805 0.0000032650 0.0000098044 -0.0000040652 -0.0000038729 0.0003099955 -0.0009843973 -0.0015884075 -0.0002547119 -0.0001080807 -0.0000827227 0.0001100292 0.0002030214 -0.0002192675 -0.0002826111 0.0002773580 -0.0000902000 -0.0006229663 -0.0002530725 0.0000651220 0.0000107065 -0.0000691018 -0.0001331393 -0.0000806391 0.0000662171 0.0000030002 0.0000420256 -0.0000061921 0.0000121764 0.0000135510 0.0000269975 -0.0000526172 0.0000035274 0.0000048417 -0.0000022206 -0.0001039565 0.0000010665 0.0000454348 -0.0000069253 0.0000009774 -0.0000060006 -0.0019894225 -0.0011462355 -0.0026700788 -0.0169680318 0.0569891814 0.0533062343 -0.0216946753 -0.0132370936 -0.0244329160 -0.0002967551 0.0009350227 0.0006805934 -0.0006115098 0.0023005323 0.0024686253 0.0012288885 0.0002930923 0.0008507342 0.2001566403 -0.6536798303 -0.5938339106 0.2841968293 0.1287251600 0.2700036241 -0.0003544591 -0.0002718746 -0.0004512729 0.0097481668 -0.0265376547 -0.0268750370 -0.0129929763 -0.0055059182 -0.0130031544 -0.0000035711 -0.0000039575 -0.0000053401 0.0000217441 0.0000055524 -0.0000155687 0.0000003635 -0.0000000300 -0.0000027017 0.0000006484 0.0000277017 0.0000978752 0.0001730930 0.0000439228 -0.0001596329 0.0000039818 0.0000252135 0.0000418236 -0.0002346749 -0.0000542833 0.0001973256 0.0000122342 0.0000059599 0.0000032023 -0.0000857424 -0.0003589657 -0.0011342672 -0.0019894133 -0.0004984128 0.0017714400 0.0000957292 -0.0000100224 0.0000086818 -0.0000320373 0.0002296299 0.0002675808 -0.0000029212 -0.0000019595 -0.0000032628 -0.0000065340 -0.0000011727 0.0000009185 -0.0000216913 0.0000266501 -0.0000191623 -0.0000260867 -0.0000008503 0.0000045954 0.0000038455 -0.0000198442 0.0000093566 0.0000150200 0.0000204352 -0.0000086724 0.0000325118 0.0002345116 -0.0001011731 -0.0002042813 -0.0000943491 0.0000654188 -0.0000071857 -0.0001945805 0.0000762624 0.0000599509 -0.0000356366 0.0000032236 0.0000814656 0.0021961978 -0.0008599402 -0.0006355892 0.0004120476 -0.0000431375 0.0000069763 0.0000170168 0.0000031444 0.0000021401 0.0000005854 0.0000030844 -0.0000602613 -0.0003901491 0.0002028857 -0.0000995712 -0.0000989710 -0.0000813378 0.0007618549 0.0043869297 -0.0021845227 0.0010248202 0.0011504834 0.0007266330 0.0000096925 0.0000433242 -0.0000213988 -0.0000257273 0.0000180668 -0.0000537621 -0.0000899649 -0.0004431868 0.0002247181 0.0003082249 -0.0001406146 0.0005850500 0.0000063980 -0.0000059005 -0.0000009399 0.0000135135 0.0000206958 0.0000323713 -0.0000992349 0.0000447363 0.0000156513 0.0000039383 0.0000246477 -0.0000385771 -0.0000321942 -0.0000560917 0.0000235194 -0.0000785821 0.0000490469 -0.0001287278 0.0005008135 0.0004461460 -0.0003527785 0.0000419943 0.0002032704 0.0001613477 -0.0000027355 -0.0000459108 -0.0000665262 0.0000221299 0.0003515675 -0.0002263063 0.0000073155 -0.0000460558 0.0000196687 -0.0000113598 -0.0000032835 0.0000019674 0.0000421673 0.0000065474 -0.0000074870 0.0000052102 -0.0000012459 0.0000095501 0.0000013422 0.0000016418 -0.0000015334 0.0000000864 -0.0000001735 0.0000008375 -0.0000007242 0.0000007136 -0.0000017232 0.0000005099 0.0000018041 -0.0000009399 -0.0000087463 0.0000033979 -0.0000097156 -0.0000185210 -0.0000102405 -0.0000094935 0.0000087042 -0.0000022071 0.0000244212 0.0000011526 0.0000026012 -0.0000101545 0.0000000067 -0.0000272843 -0.0000375801 -0.0001329770 -0.0002613327 0.0000519394 0.0000152071 -0.0000278406 -0.0000187256 -0.0000003663 0.0000019475 0.0000012257 -0.0000013845 -0.0000012671 0.0000015248 -0.0000315191 -0.0000074715 0.0000167158 0.0000052459 0.0000078354 -0.0000008336 -0.0000108787 -0.0000022399 0.0000062836 0.0000007833 -0.0000027978 -0.0000041053 0.0003369071 0.0000627064 -0.0001845655 -0.0000358494 -0.0000979493 -0.0000050600 0.0001315788 0.0000262654 -0.0000784363 0.0000166796 0.0000231513 -0.0000054836 -0.0000007014 0.0000087240 0.0000035770 -0.0000662899 -0.0000917159 0.0000025410 0.0000033761 0.0000090727 -0.0000005348 -0.0000077222 0.0000151954 0.0000052853 0.0000045303 0.0000042866 -0.0000014615 -0.0002305693 -0.0000124284 0.0001054936 0.0000134398 0.0000060307 -0.0000041220 0.0000004714 -0.0000009237 -0.0000010516 -0.0000453550 -0.0000680104 0.0000060524 0.0027205997 0.0001491205 -0.0012539372 -0.0001156950 -0.0001706100 -0.0000127320 -0.0000052968 0.0000008088 -0.0000013011 0.0000903120 -0.0001708252 -0.0000597408 0.0000339648 -0.0000098025 -0.0000098843 -0.0006918367 0.0002823356 0.0001459576 -0.0000002142 -0.0000001134 0.0000021323 0.0000007348 0.0000016812 0.0000008716 -0.0000107575 -0.0000069969 0.0000001400 0.0000108379 0.0000071827 0.0000006349 -0.0000075700 -0.0000095014 -0.0000006255 -0.0000026129 -0.0000054187 -0.0000095693 -0.0001234900 -0.0000919986 0.0000021612 -0.0000159249 -0.0000288554 0.0000130224 0.0000032361 -0.0000011852 -0.0000020879 -0.0000094166 0.0000004803 0.0000052600 -0.0000267178 0.0000861092 0.0001191583 0.0000692797 0.0000048513 0.0000253936 0.0000079294 0.0000186456 -0.0000187776 -0.0002806996 0.0000915260 -0.0002183645 0.0016531360 0.0004668322 -0.0003973932 0.0001755055 0.0006805252 0.0005158867 -0.0001587961 0.0001285313 0.0000262858 0.0002754150 0.0001070538 0.0001458644 0.0000962087 0.0001692219 -0.0002877785 -0.0000072092 0.0000178126 -0.0000151809 0.0001063858 0.0000010063 -0.0000434974 -0.0000091199 -0.0000042593 0.0000025220 -0.0000726793 0.0008701739 0.0008872604 0.0026012390 -0.0048013082 -0.0039181165 -0.0160164271 -0.0064647910 -0.0143573494 0.0025077307 0.0017900835 0.0033277396 0.0214138004 -0.0574714981 -0.0576764402 -0.0126810417 -0.0018947896 -0.0087346705 -0.0165656525 0.0512359741 0.0460809527 0.1766313287 0.0781057998 0.1646147400 -0.0001060852 -0.0009091375 -0.0013568746 -0.2407737145 0.6454309409 0.6519511051 0.1043057595 0.0402441614 0.1027878951 -0.0000050591 -0.0000075161 -0.0000159461 0.0000688596 0.0000165333 -0.0000573925 -0.0000028026 0.0000004104 0.0000070642 -0.0000088575 -0.0000319504 -0.0000948087 0.0000116112 0.0000045315 -0.0000053776 0.0000155596 0.0000587375 0.0001706613 -0.0007768983 -0.0001805131 0.0006510236 0.0000002375 -0.0000007380 -0.0000023672 0.0000999399 0.0003554349 0.0010702250 -0.0000896639 -0.0000251381 0.0000827559 0.0004440691 0.0002768112 0.0005571312 -0.0001776585 0.0002307893 0.0002452521 -0.0000004202 0.0000003553 0.0000003365 0.0000005150 0.0000004415 0.0000007414 0.0000062904 0.0000035963 0.0000040855 0.0000069211 0.0000011090 -0.0000007592 -0.0000018278 -0.0000172723 0.0000079633 -0.0000117751 -0.0000075162 0.0000045484 0.0000075726 0.0001662917 -0.0000626157 0.0001407625 0.0000576500 -0.0000421171 0.0000029147 0.0000655192 -0.0000263356 -0.0000137973 0.0000082902 -0.0000002438 -0.0000399855 -0.0007362317 0.0003046349 0.0001459692 -0.0000920675 0.0000132701 -0.0000009273 -0.0000026863 -0.0000007415 -0.0000000268 0.0000000054 0.0000003109 0.0000056142 0.0000368520 -0.0000194161 0.0000061585 0.0000057017 0.0000060783 -0.0000670083 -0.0004113284 0.0002088627 -0.0000633438 -0.0000688403 -0.0000418712 -0.0000003015 -0.0000008686 0.0000006793 -0.0000009320 -0.0000002881 -0.0000008105 0.0000009467 0.0000063230 -0.0000004799 0.0000060157 -0.0000024519 0.0000163250 -0.0000023850 0.0000022447 0.0000045744 -0.0000022198 -0.0000233897 -0.0000375418 0.0000356610 -0.0000163676 -0.0000055172 -0.0000052451 0.0000142812 -0.0000210396 0.0000061030 0.0000105547 0.0000001950 -0.0000013571 -0.0000088570 0.0000050197 -0.0000720587 -0.0000768411 0.0000283992 -0.0000047680 -0.0000516795 -0.0000462062 0.0000009819 0.0000012307 0.0000001647 0.0000005299 0.0000225720 -0.0000057557 -0.0000003718 -0.0000024449 0.0000011341 -0.0000016953 0.0000012219 -0.0000028779 -0.0000072799 -0.0000021690 0.0000024877 -0.0000441850 -0.0000155303 -0.0000540546 0.0000141541 0.0000019194 0.0000170004 -0.0000222600 -0.0001148520 0.0000502263 -0.0000431836 -0.0000091383 0.0000619079 0.0002185467 0.0011465314 -0.0006539252 0.0000155260 0.0000063046 0.0000142848 0.0000080160 0.0000034074 -0.0000012857 -0.0000090785 -0.0000003898 0.0000032707 0.0000156530 -0.0000057764 -0.0000115335 0.0000034454 0.0000014773 -0.0000029958 0.0000918000 0.0001165908 0.0000123452 0.0009559785 -0.0015167506 -0.0011350436 -0.0000831931 0.0001256364 0.0000977441 -0.0000058812 0.0000032540 0.0000066589 -0.0000587486 -0.0000156354 0.0000325995 0.0000430297 0.0000757047 0.0000026487 -0.0000393274 -0.0000093499 0.0000139114 0.0000019387 0.0000003880 -0.0000019456 0.0006720943 0.0001672497 -0.0003625514 -0.0004079404 -0.0008296088 -0.0000543700 0.0004939988 0.0001230681 -0.0002644988 0.0000101363 -0.0000129962 -0.0000156119 -0.0000879208 -0.0000973756 0.0000242309 0.0008450703 0.0010844457 0.0000419444 -0.0000015148 -0.0000018336 -0.0000050237 -0.0000009282 0.0000012500 0.0000008043 0.0000044581 0.0000130275 0.0000009174 0.0000185218 0.0000015592 -0.0000086634 0.0000037644 0.0000088950 -0.0000005371 0.0000159064 -0.0000017335 -0.0000068298 -0.0000616673 -0.0001112267 -0.0000011947 -0.0002185558 -0.0000233558 0.0001013083 -0.0000601696 -0.0001015002 0.0000150018 -0.0001717437 -0.0000015512 0.0000686417 0.0000013218 -0.0000060408 -0.0000049487 0.0000036476 -0.0000014010 -0.0000018071 -0.0000617805 -0.0000002341 0.0000167359 0.0008286069 0.0003305953 -0.0005888423 0.0000206308 0.0000327903 -0.0000287845 -0.0000040056 -0.0000000061 -0.0000161072 -0.0000047467 0.0000015395 0.0000008781 0.0000019687 -0.0000098170 0.0000002586 -0.0000266896 0.0000322322 0.0000639451 0.0000130306 0.0000043117 0.0000014247 0.0000005320 0.0000036236 -0.0000004628 -0.0000100389 0.0000068138 0.0000131314 0.0000130545 -0.0000035895 -0.0000100705 -0.0000510845 -0.0006199345 -0.0005329093 0.0002307405 0.0001705780 0.0001114507 0.0000889738 0.0001165472 -0.0003460060 -0.0000414795 0.0000690439 -0.0000142609 -0.0001070307 -0.0000227061 0.0000240483 -0.0000297292 -0.0000631533 -0.0000232046 -0.0000297800 0.0000393377 0.0000063327 -0.0000098944 -0.0000084577 -0.0000010190 -0.0000045919 -0.0000130366 0.0000073300 -0.0000043168 -0.0000158865 0.0000216124 -0.0001702325 0.0000110594 0.0000646451 0.0000159562 0.0000109112 0.0000118697 -0.0000051177 0.0000009318 -0.0000024520 -0.0000273989 0.0000698593 0.0000622615 0.0001074430 0.0000462443 0.0000987335 0.0000073637 -0.0000037044 -0.0000006590 0.0000368249 -0.0001004960 -0.0001018462 -0.0000258302 -0.0000058176 -0.0000204834 0.0002375539 -0.0007644903 -0.0006905624 -0.0011815026 -0.0005287052 -0.0010991405 -0.0000005785 -0.0000004782 0.0000002865 -0.0004225851 0.0011214440 0.0011405857 0.0002256251 0.0000893143 0.0002318937 0.0045573200 0.0068366099 0.0144662084 -0.0654502934 -0.0155249600 0.0551879437 -0.0003443006 -0.0012122913 -0.0040185837 0.0009321830 0.0020602814 0.0054757909 0.0008263365 0.0000546719 -0.0012656097 -0.0133272991 -0.0558267862 -0.1523924078 0.7390506561 0.1701004083 -0.6208114338 -0.0009253653 0.0000877770 0.0011019414 -0.0067211497 -0.0220093095 -0.0647478596 -0.0114746692 -0.0030283976 0.0107054043 0.0000009296 0.0000005844 0.0000002472 0.0000010330 0.0000000602 -0.0000009072 0.0002347200 0.0000625819 -0.0000775804 0.0000706339 -0.0002117821 -0.0007195129 0.0000000157 0.0000000868 0.0000005498 0.0000023557 -0.0000026735 0.0000005305 -0.0000000338 -0.0000020360 0.0000011911 -0.0000005220 -0.0000010193 0.0000008826 0.0000002175 0.0000210884 -0.0000037362 0.0000095619 0.0000066787 0.0000013158 0.0000034251 0.0000447432 -0.0000176983 -0.0000115020 0.0000053383 0.0000005295 -0.0000305318 -0.0005003570 0.0002091614 0.0001064795 -0.0000662370 0.0000092821 -0.0000057068 0.0000007017 -0.0000101662 -0.0000004006 -0.0000009832 -0.0000102902 0.0000132641 0.0000769472 -0.0000356644 0.0000105031 0.0000126086 0.0000066600 -0.0001490950 -0.0008399493 0.0004207468 -0.0001238832 -0.0001371783 -0.0000848897 -0.0000030314 -0.0000272742 0.0000162347 0.0000091804 -0.0000080191 0.0000219410 0.0000510044 0.0002603467 -0.0001418090 -0.0001292118 0.0000486454 -0.0002302487 -0.0000099095 0.0000589235 -0.0000431936 -0.0000071245 -0.0000781138 -0.0002230944 0.0000674196 -0.0001335112 0.0000495129 0.0000467890 -0.0004208489 0.0007443372 -0.0000819083 -0.0004103887 0.0002105416 -0.0020213260 0.0008941551 -0.0036340284 0.0016297955 0.0021238473 -0.0013993657 0.0009610896 0.0026354071 0.0024971723 0.0000930177 0.0000000821 0.0001025185 0.0001546263 0.0016859977 -0.0006501510 0.0000319365 -0.0001782438 0.0000621313 -0.0000030663 -0.0000017975 0.0000035879 0.0000347111 -0.0000295600 0.0000098472 -0.0000192018 0.0000030484 -0.0000320576 0.0000060641 -0.0000014324 0.0000063565 -0.0000000077 0.0000052675 -0.0000048951 0.0000028848 -0.0000026112 0.0000059142 -0.0000129346 -0.0000671837 0.0000428217 0.0000233098 -0.0000118419 0.0000374222 0.0000327018 0.0000311143 0.0000479320 -0.0000213369 0.0000027737 -0.0001097283 -0.0000167782 -0.0000078783 0.0000585100 -0.0000053373 0.0002117739 0.0001927459 0.0003286963 0.0008539654 -0.0002477218 -0.0000199522 0.0000609031 0.0000273026 -0.0000003669 -0.0000008180 -0.0000007356 0.0000094746 0.0000063814 -0.0000090557 0.0000816692 0.0000199576 -0.0000420106 -0.0000103323 -0.0000137317 0.0000027797 -0.0000002356 -0.0000030719 -0.0000006355 -0.0000037509 -0.0000005634 0.0000126494 -0.0008278517 -0.0001361804 0.0004571926 0.0000627786 0.0001689608 0.0000061695 -0.0000089912 0.0000018225 -0.0000061146 -0.0000554740 -0.0000749601 0.0000277756 0.0000096420 -0.0000019657 -0.0000272134 0.0001115932 0.0001282275 0.0000062288 -0.0000085806 -0.0000265631 0.0000021030 -0.0000297082 0.0000380467 0.0000175153 -0.0000125584 -0.0000163678 0.0000023210 0.0006123010 0.0000241498 -0.0002742465 0.0000761221 0.0001608200 -0.0000116396 -0.0000296608 -0.0000016822 0.0000122392 0.0001262717 0.0001996828 -0.0000312760 -0.0072011184 -0.0003468979 0.0031885394 -0.0009172836 -0.0015502256 0.0002167632 0.0003163750 0.0000067538 -0.0001354249 0.0002298707 -0.0004331599 -0.0001634876 -0.0001417139 0.0000386286 0.0000456128 0.0028531366 -0.0010883719 -0.0007577637 -0.0000042049 -0.0000013761 -0.0000014452 0.0000042355 0.0000084106 0.0000176983 -0.0000210723 -0.0000365501 -0.0000165369 0.0000283801 0.0000215900 0.0000009173 -0.0000135361 -0.0000192236 0.0000096056 -0.0000112768 0.0000353878 0.0000633869 0.0001708854 0.0000521432 0.0000189156 -0.0000052110 -0.0000084597 0.0000027617 -0.0000003763 0.0000046049 0.0000041501 -0.0000141599 -0.0000081431 0.0000012681 0.0001352515 -0.0004427493 -0.0006799261 -0.0000441715 -0.0000421560 -0.0000104433 0.0000593610 0.0001741833 -0.0001864437 -0.0004443197 0.0006800610 0.0000796352 -0.0012871456 -0.0003458642 0.0000445159 -0.0001919179 -0.0008280819 -0.0004916040 -0.0000812428 0.0000611190 0.0000189429 0.0001261447 0.0000536109 0.0000780928 0.0000579316 0.0000733671 -0.0002336665 -0.0000010343 0.0000750139 -0.0000572778 0.0001005378 0.0000044519 -0.0000391030 0.0000416032 -0.0000034319 0.0000638621 -0.0013311240 -0.0002035562 -0.0012361281 -0.0117895060 0.0270948664 0.0236761872 0.0546842388 0.0234231659 0.0503090375 0.0016114392 -0.0023050846 -0.0018926057 0.0054689856 -0.0155827007 -0.0158877333 -0.0041514114 -0.0010368581 -0.0034052476 0.0929752236 -0.2935654312 -0.2653129103 -0.6055943562 -0.2695457773 -0.5651528519 0.0006103632 0.0003616171 0.0005766044 -0.0646515910 0.1732642075 0.1755242024 0.0362857917 0.0140696275 0.0359652861 -0.0000115733 -0.0000210529 -0.0000487753 0.0001605233 0.0000380947 -0.0001350803 0.0000062153 0.0000045013 0.0000057159 0.0000084805 0.0000354898 0.0001096717 -0.0000181192 -0.0000057358 0.0000128903 0.0000411678 0.0001858107 0.0005168313 -0.0018097352 -0.0004175866 0.0015165624 0.0000031290 -0.0000004727 -0.0000037178 -0.0001102418 -0.0003996915 -0.0012210793 0.0001670858 0.0000580398 -0.0001571462 -0.0000430195 0.0000576919 0.0000879776 0.0000908618 -0.0004072254 -0.0004653527 0.0000002806 0.0000000148 0.0000014311 -0.0000012885 0.0000004826 0.0000025993 -0.0000038110 0.0000163475 -0.0000075936 -0.0000094650 0.0000018354 -0.0000000782 0.0000005262 -0.0000218480 0.0000097509 0.0000006354 0.0000056787 -0.0000015507 0.0000249127 0.0002261694 -0.0000942912 -0.0000200822 -0.0000145282 0.0000086561 -0.0000009388 -0.0000490849 0.0000194930 0.0000158227 -0.0000100793 0.0000014620 0.0000212235 0.0005551052 -0.0002231306 -0.0001768155 0.0001152017 -0.0000100827 0.0000006539 0.0000042961 -0.0000004285 0.0000003622 -0.0000000076 0.0000015882 -0.0000083082 -0.0000516536 0.0000277948 -0.0000139079 -0.0000136552 -0.0000106612 0.0001036335 0.0005725036 -0.0002860434 0.0001474918 0.0001617213 0.0001071779 0.0000009309 0.0000067437 -0.0000036571 -0.0000020521 0.0000023753 -0.0000044315 -0.0000131976 -0.0000639697 0.0000336964 0.0000293395 -0.0000131529 0.0000577457 -0.0000013974 -0.0000012386 -0.0000013129 0.0000015815 0.0000139701 0.0000173070 0.0000042960 -0.0000062553 -0.0000049263 0.0000018499 0.0000075641 -0.0000121264 -0.0000101168 -0.0000146234 -0.0000012622 0.0000082648 -0.0000103319 0.0000142190 0.0001149612 0.0000778414 -0.0000824813 0.0000305129 0.0001020462 0.0000620868 0.0000016544 0.0000014477 -0.0000002728 0.0000012748 0.0000065962 -0.0000084863 -0.0000003341 -0.0000012754 0.0000000916 0.0000009344 -0.0000015531 -0.0000030333 -0.0000161225 -0.0000072242 0.0000035138 -0.0000678517 -0.0000107260 -0.0000981227 0.0000204714 -0.0000000032 0.0000198330 -0.0000555060 -0.0001392976 0.0000635435 0.0000031178 -0.0000320071 -0.0001097758 0.0002892198 0.0011242102 -0.0006748428 0.0000063193 0.0000850632 0.0000642495 0.0000091826 0.0000173533 0.0000079608 0.0000118654 -0.0000178828 -0.0000203913 -0.0000046049 -0.0000081214 0.0000128627 0.0000013850 0.0000143810 0.0000087847 -0.0000278337 -0.0000735483 -0.0000091466 -0.0056019817 0.0089828834 0.0062780367 0.0004058642 -0.0007063062 -0.0005485228 -0.0000034303 -0.0000067446 -0.0000036928 0.0004476559 0.0001125452 -0.0002472861 -0.0000868687 -0.0001612270 -0.0000205675 0.0000169107 0.0000253516 0.0000044928 -0.0000154969 -0.0000077972 0.0000097740 -0.0048819373 -0.0012640293 0.0027367276 0.0007089885 0.0016172799 0.0000857505 -0.0002564505 -0.0000752309 0.0001398655 -0.0000183579 0.0000078468 0.0000191334 0.0000477326 0.0000433642 -0.0000227839 -0.0003510350 -0.0004502186 -0.0000256129 -0.0000006683 0.0000000082 0.0000026546 0.0000027884 -0.0000048873 -0.0000019663 0.0000021248 0.0000029636 -0.0000008779 -0.0000018305 -0.0000001483 0.0000009569 -0.0000056709 -0.0000080642 0.0000014160 0.0000049426 0.0000005865 -0.0000019380 -0.0000100047 -0.0000200003 0.0000054216 0.0000148453 -0.0000015168 -0.0000089676 0.0000539392 0.0000922746 -0.0000143783 -0.0000555866 0.0000030253 0.0000245615 -0.0000287398 0.0000610107 0.0000196942 0.0000022104 0.0000087014 -0.0000014086 0.0000173542 -0.0000782915 -0.0000022263 0.0002868821 0.0006348122 0.0013344918 0.0000008064 0.0000067590 0.0000137161 0.0000009520 -0.0000174804 -0.0000116771 0.0000060377 0.0000050554 0.0000011703 -0.0000015903 -0.0000011597 -0.0000010721 -0.0000052408 0.0000154741 0.0000296757 0.0000018069 0.0000035473 0.0000046368 -0.0000013343 -0.0000007230 0.0000021055 -0.0000054611 0.0000034509 0.0000056234 -0.0000008797 -0.0000054235 -0.0000039130 0.0000504376 -0.0002321617 -0.0003012081 -0.0000074099 0.0000088779 0.0000018998 0.0000229702 0.0000410729 -0.0000637527 -0.0000087067 0.0000121816 -0.0000001107 0.0000055315 -0.0000003628 -0.0000066465 -0.0000061195 -0.0000516465 -0.0000522174 -0.0000027052 0.0000063008 -0.0000031697 0.0000212239 0.0000140167 -0.0000017637 0.0000030167 0.0000099606 -0.0000147018 0.0000067114 0.0000403561 -0.0000249363 -0.0000244570 0.0000077401 0.0000113365 0.0000353829 0.0000089826 0.0000387041 -0.0000037995 -0.0000014684 -0.0000038478 -0.0000250751 0.0000658481 0.0000575188 0.0000873156 0.0000364515 0.0000785726 -0.0000001619 -0.0000056394 -0.0000067466 -0.0000147013 0.0000387635 0.0000383854 0.0000088105 0.0000006341 0.0000048553 0.0002218749 -0.0007503262 -0.0006507299 -0.0009531323 -0.0004341465 -0.0008877023 0.0000008737 0.0000006871 0.0000016479 0.0001617350 -0.0004378491 -0.0004438010 -0.0000705901 -0.0000274139 -0.0000716181 0.0001689650 0.0007962170 0.0023401543 -0.0037854651 -0.0007346030 0.0037051358 -0.0030404908 -0.0007890405 0.0022016011 -0.0080357798 -0.0271043539 -0.0799456566 0.0215867178 0.0068380472 -0.0148708984 -0.0017174517 -0.0082696976 -0.0232265436 0.0433567391 0.0096637630 -0.0368630221 0.0001137368 -0.0004222822 -0.0011771322 0.0866172943 0.3022021811 0.8992698551 -0.2081569468 -0.0571196700 0.1837847914 -0.0000005822 0.0000002752 -0.0000004568 0.0000004444 -0.0000004614 -0.0000008539 -0.0004707501 -0.0000138625 0.0005300234 0.0001134656 0.0000780591 0.0001046536 0.0000000966 0.0000008064 -0.0000005278 -0.0000009924 -0.0000017332 0.0000009390 -0.0000002105 -0.0000018762 0.0000003597 -0.0000007585 -0.0000006250 -0.0000001157 -0.0000006070 0.0000086853 -0.0000096780 0.0000135048 0.0000019724 -0.0000089871 -0.0000007509 -0.0000070216 0.0000031590 -0.0000029375 0.0000022650 -0.0000006352 0.0000167623 0.0000836256 -0.0000523597 0.0000447702 -0.0000317356 0.0000009780 -0.0000042022 0.0000027613 -0.0000065668 0.0000026635 0.0000101237 -0.0000080659 0.0000019406 0.0000056333 0.0000020174 -0.0000010730 0.0000013715 -0.0000029147 -0.0000129679 -0.0000426874 0.0000045265 -0.0000048714 -0.0000090587 -0.0000094764 -0.0000065595 -0.0000283472 0.0000142892 0.0000106081 -0.0000047602 0.0000205320 0.0000564827 0.0002648285 -0.0001382880 -0.0001234122 0.0000472770 -0.0002313571 0.0000002049 0.0000070517 -0.0000093339 -0.0000166232 0.0000131724 -0.0000138275 -0.0000065942 -0.0000072045 0.0000019248 0.0000077656 -0.0000782224 0.0001393225 -0.0000104075 -0.0000290604 0.0000010994 -0.0000308798 0.0000518356 -0.0000961722 0.0001095487 0.0001149474 -0.0000836187 0.0000244490 0.0003096393 0.0001847741 0.0000052824 -0.0000166703 0.0000005995 0.0000388571 0.0000072488 -0.0000030645 0.0000030475 0.0000100780 -0.0000035413 -0.0000037248 -0.0000004631 0.0000018860 0.0000224218 0.0000077544 -0.0000027682 0.0000168204 -0.0000069510 0.0000342348 -0.0000067002 -0.0000082822 -0.0000043810 0.0000018407 -0.0000018725 0.0000003200 -0.0000034229 -0.0000017987 -0.0000056519 -0.0000046870 0.0000719717 -0.0000516963 -0.0000301971 0.0000306516 -0.0000302162 -0.0000244880 0.0000104281 -0.0000134306 0.0000352746 -0.0000460797 0.0000566152 0.0000090520 0.0000562831 -0.0000698800 -0.0001503438 0.0000374232 -0.0000814260 -0.5418502784 -0.8332303109 0.0763127125 -0.0002361910 0.0008212661 0.0005026146 -0.0000375724 -0.0001856073 -0.0000318360 -0.0000031821 0.0008711400 0.0006646643 0.0000507693 0.0004465366 0.0000685937 0.0000111641 0.0002039647 0.0000489873 -0.0000244560 -0.0008906503 -0.0002862261 -0.0002971791 -0.0006383258 -0.0001582937 -0.0001073720 -0.0004007410 -0.0000573946 -0.0003516976 -0.0009395235 -0.0002318123 0.0017869704 0.0012018929 -0.0006282492 0.0399739189 0.0598430659 -0.0066567334 0.0004232582 0.0003699908 -0.0006713774 -0.0187221222 -0.0166951668 0.0050590054 0.0000600355 0.0005836371 0.0000845303 -0.0000683870 -0.0000246921 0.0000227249 0.0001415431 -0.0000411676 -0.0000734842 -0.0000578443 -0.0003554757 -0.0000022846 0.0001700212 0.0001016361 -0.0000699847 0.0000587895 0.0000987857 -0.0000237961 0.0005413196 0.0001076665 0.0000229274 -0.0070968113 0.0041587200 0.0050175158 -0.0004111674 -0.0003431227 0.0002212555 -0.0001712270 0.0000423882 0.0000845604 0.0002858709 -0.0000920714 -0.0001070710 -0.0006464984 0.0005104940 -0.0000420957 0.0157780004 0.0023875661 0.0021911263 -0.0000099529 -0.0000080642 0.0000038766 0.0002017378 0.0004573867 0.0014120614 -0.0001721639 -0.0015382451 -0.0009208384 0.0007163515 0.0005670289 0.0000713218 -0.0002613921 -0.0001690729 0.0000956547 0.0000712539 0.0000094784 -0.0000585429 0.0000537492 -0.0000883944 -0.0004165464 0.0000491314 0.0000552125 -0.0000474470 -0.0003330043 0.0002391787 0.0003479724 0.0000251971 -0.0002256578 -0.0001886335 -0.0002602650 0.0001849683 0.0006336852 0.0004433784 -0.0000629605 0.0001666565 -0.0001831413 0.0004217271 -0.0004734195 -0.0006181933 0.0011179109 0.0003920318 -0.0003739885 -0.0001848714 -0.0006760119 0.0024147185 0.0016449210 0.0053041432 -0.0000492146 -0.0001277854 0.0000873343 0.0002555567 0.0002904789 0.0002717300 -0.0000025076 -0.0001408246 -0.0006008166 0.0000183880 0.0007980476 -0.0001129244 -0.0007643922 0.0002185268 0.0004321367 0.0005238918 0.0003206280 0.0008607652 0.0000281265 0.0000038811 0.0000208430 -0.0000411192 -0.0000025009 -0.0000094344 0.0000839521 0.0000000404 0.0000765879 -0.0000152054 0.0000202929 0.0000174139 -0.0000108936 0.0000003177 -0.0000078286 0.0000074420 -0.0000054389 -0.0000076215 0.0001871986 -0.0001807126 -0.0001269819 -0.0003783641 0.0002614933 -0.0009681747 0.0000274010 0.0001023285 0.0001628786 -0.0000219571 -0.0000067657 -0.0000209226 -0.0001143689 -0.0000693902 -0.0001181932 0.0000148905 0.0000069754 0.0000074517 -0.0000196180 -0.0000096804 0.0000039604 0.0000072243 0.0000033410 0.0000128748 0.0000028294 0.0000048252 0.0000034836 -0.0000049052 -0.0000013131 -0.0000003240 -0.0000837650 -0.0000364801 -0.0001167036 0.0000820326 0.0001259596 -0.0000983550 -0.0000419871 0.0000164746 0.0000632208 0.0000121218 -0.0000651426 -0.0000632002 0.0000813224 -0.0000136409 -0.0000625346 0.0000289432 -0.0000405952 -0.0000820623 -0.0000462352 -0.0000700558 -0.0000552550 0.0000042175 -0.0000107029 -0.0000373073 0.0000324852 -0.0000070276 -0.0000259035 -0.0000029628 -0.0000011071 0.0000002504 -0.0000030644 0.0000035410 -0.0000030309 0.0000020583 0.0000072457 -0.0000035890 0.0000010514 0.0000036439 -0.0000018942 0.0000128482 -0.0000413970 0.0000144195 -0.0000543198 -0.0000229801 0.0000173227 0.0000008848 -0.0000098245 0.0000029949 0.0000002651 -0.0000034080 0.0000003060 -0.0000054631 0.0000752151 -0.0000230268 -0.0000488749 0.0000249911 -0.0000021802 0.0000052555 0.0000041368 0.0000051829 -0.0000006241 0.0000017927 -0.0000020902 -0.0000026385 -0.0000049865 -0.0000017272 0.0000020821 0.0000010769 0.0000016783 0.0000187342 0.0000355286 0.0000086537 -0.0000172601 -0.0000227139 -0.0000084690 -0.0000010184 -0.0000053883 0.0000018240 0.0000026721 0.0000002965 0.0000024602 0.0000039829 0.0000662965 -0.0000336428 -0.0000293768 0.0000102280 -0.0000477657 0.0000580674 0.0001050628 -0.0000552010 -0.0006195335 -0.0007429299 -0.0008521727 -0.0003229701 0.0000132145 -0.0001106703 -0.0001090415 -0.0007876123 0.0008059077 -0.0000662777 0.0001791102 -0.0000718188 0.0004411785 -0.0004685829 0.0004532458 -0.0008405083 -0.0005690150 0.0001787526 0.0001730139 -0.0010549334 -0.0006926359</array>
                  </module>
                  <molecule cmlx:templateRef="atom" id="molecule-rot">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="-3.16273767" y3="-2.72383102" z3="1.04091973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="-4.44488345" y3="-4.28070563" z3="1.75053004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="-4.38533038" y3="-3.26242496" z3="1.35415058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="-4.25237375" y3="-0.6649596" z3="0.24331905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="-3.10883623" y3="-1.40073377" z3="0.50801031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="-3.20956242" y3="1.56075616" z3="-0.02089096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="-4.10886494" y3="0.62300715" z3="-0.49355529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="-3.56346894" y3="3.00709572" z3="-1.90573807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="-2.88521215" y3="2.75012339" z3="-0.73843146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="-3.3456506" y3="3.92105883" z3="-2.46703048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="-2.55815534" y3="1.31306719" z3="1.15002956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="-1.8843228" y3="-0.89922973" z3="0.19374916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="-1.2191437" y3="0.35018849" z3="1.08219506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.13876833" y3="0.93466016" z3="0.24335888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="-0.96937911" y3="-0.0943368" z3="2.50035385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="3.13482674" y3="-0.60891846" z3="1.40185439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.50116806" y3="4.06313001" z3="4.14826663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.99282047" y3="3.27196741" z3="3.57576394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="3.2280312" y3="1.28435694" z3="2.08624731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.40874872" y3="2.00879857" z3="3.50095276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="3.2028311" y3="3.53827178" z3="2.93193318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="3.82022666" y3="2.54091895" z3="2.18123579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="2.03252348" y3="0.99530033" z3="2.77049992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="0.45933465" y3="1.78857711" z3="3.99463241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="3.65082942" y3="4.53267196" z3="2.98899613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="4.74885019" y3="2.76458952" z3="1.65069165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="3.71656785" y3="0.22305432" z3="1.30110308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="4.72236243" y3="0.23045613" z3="0.43512267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="5.41969149" y3="1.06511305" z3="0.52016008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="5.29672628" y3="-1.04477131" z3="-0.0278354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="6.47974641" y3="-3.44064081" z3="-0.87982392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="6.58723364" y3="-1.04659164" z3="-0.57735435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="4.61232659" y3="-2.26332721" z3="0.09466416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="5.19759281" y3="-3.45365209" z3="-0.32712942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="7.17479374" y3="-2.23620916" z3="-0.99862896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="7.13751043" y3="-0.10605219" z3="-0.66773705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="3.61948769" y3="-2.31247628" z3="0.54741682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="4.64997767" y3="-4.39178644" z3="-0.19953582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="8.18503056" y3="-2.22307201" z3="-1.41682454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="6.9437963" y3="-4.37633338" z3="-1.20393525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.5703537" y3="-0.25901063" z3="2.67159975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="0.55365114" y3="-0.26418821" z3="2.70569837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="-1.74937472" y3="3.59452905" z3="-0.28706744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="4.00048794" y3="1.36697418" z3="-1.42461654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="3.99336188" y3="0.25081935" z3="-2.26006545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="3.02621639" y3="-0.5895664" z3="-2.40023839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="1.36225436" y3="-1.09776779" z3="-2.38672388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="0.23168189" y3="0.31988534" z3="-2.80194419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.11003242" y3="-1.88955068" z3="-0.7294431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="1.36786665" y3="-2.39148024" z3="-3.74157164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="5.09616161" y3="-0.03792516" z3="-2.93620444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="5.1646548" y3="-1.26043226" z3="-3.65304654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="0.05185851" y3="0.93717662" z3="-1.90510254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.74343742" y3="-0.09660882" z3="-3.11680129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="0.62386496" y3="0.93467556" z3="-3.63141117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.73815804" y3="-2.79262613" z3="-0.65363592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.05313386" y3="-2.18463579" z3="-0.61404182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="1.33198424" y3="-1.19517493" z3="0.0970855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="2.11523278" y3="-3.17868806" z3="-3.53768546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.37709128" y3="-2.87712031" z3="-3.8057943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="1.58793215" y3="-1.94921412" z3="-4.72951739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="5.00088635" y3="-2.12096631" z3="-2.98478443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="6.17977588" y3="-1.29963879" z3="-4.06996989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="4.42141554" y3="-1.2764834" z3="-4.46690876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="-1.88000872" y3="-3.47198307" z3="1.16852758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="-0.9371085" y3="-3.09796741" z3="2.13430181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="0.33699833" y3="-3.65202916" z3="2.13058898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="0.65201236" y3="-4.59469314" z3="1.15637876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="-0.28592264" y3="-5.04285968" z3="0.23102877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="-1.55765826" y3="-4.47882625" z3="0.24874769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="-1.18004243" y3="-2.30135992" z3="2.83963661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="1.09855861" y3="-3.3157048" z3="2.83533282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.0460487" y3="-5.02876599" z3="1.02017687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-0.00127261" y3="-5.78452745" z3="-0.51609061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="-2.29602361" y3="-4.78217475" z3="-0.4986008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.71737427" y3="3.87886871" z3="-1.19135063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="0.4253562" y3="4.55366692" z3="-0.78263294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="0.52036458" y3="4.95847823" z3="0.54369493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.50711826" y3="4.73558089" z3="1.45518903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-1.63665255" y3="4.04516445" z3="1.03530248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.78840879" y3="3.51230208" z3="-2.21864878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="1.25035765" y3="4.7469156" z3="-1.46881428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="1.74563806" y3="5.61968666" z3="0.99763006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.40338031" y3="5.083771" z3="2.48294811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="-2.43197923" y3="3.82984901" z3="1.75078133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3399487" y3="-5.69757017" z3="0.04848595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.84244974" y3="-4.66062701" z3="1.8584393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="1.71163297" y3="6.21084979" z3="2.05562664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="2.73199566" y3="5.52879498" z3="0.29391838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="-5.58009565" y3="-2.50508806" z3="1.21389759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="-5.51692024" y3="-1.18926884" z3="0.66959002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="-6.83666597" y3="-3.03164329" z3="1.62009489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="-7.98292989" y3="-2.28234449" z3="1.51659178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="-6.87231301" y3="-4.04605441" z3="2.02926395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="-8.94295635" y3="-2.69585869" z3="1.83790866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="-6.71905652" y3="-0.43182799" z3="0.59539396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="-7.9175927" y3="-0.96315462" z3="1.00742834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="-6.67869146" y3="0.5908129" z3="0.21320053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="-8.82743299" y3="-0.35920398" z3="0.94795914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="-4.76376117" y3="0.86635096" z3="-1.74843162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="-4.51525456" y3="2.09399857" z3="-2.43030621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="-5.62001379" y3="-0.08304264" z3="-2.37482096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="-6.23515359" y3="0.19549998" z3="-3.57214251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="-5.78572076" y3="-1.05067898" z3="-1.89861639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="-6.88832974" y3="-0.55236187" z3="-4.03077115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="-5.17782066" y3="2.35946587" z3="-3.66036705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="-6.02688534" y3="1.43667129" z3="-4.21910716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="-4.98745681" y3="3.3135268" z3="-4.16166225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="-6.52873941" y3="1.65005405" z3="-5.16701246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="5.12901899" y3="2.35853601" z3="-1.59261399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="5.18242355" y3="3.03238028" z3="-0.72064188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="6.10653603" y3="1.86749596" z3="-1.72485449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="4.96466973" y3="3.00168333" z3="-2.47797664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="2.66937593" y3="1.91686853" z3="-0.97745286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="2.07193396" y3="2.25224987" z3="-1.84525838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="2.04036459" y3="1.20440616" z3="-0.41791407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="2.81031508" y3="2.79511387" z3="-0.32968223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:-3.1627,-2.7238,1.0409;-4.4449,-4.2807,1.7505;-4.3853,-3.2624,1.3542;-4.2524,-.665,.2433;-3.1088,-1.4007,.508;-3.2096,1.5608,-.0209;-4.1089,.623,-.4936;-3.5635,3.0071,-1.9057;-2.8852,2.7501,-.7384;-3.3457,3.9211,-2.467;-2.5582,1.3131,1.15;-1.8843,-.8992,.1937;-1.2191,.3502,1.0822;-.1388,.9347,.2434;-.9694,-.0943,2.5004;3.1348,-.6089,1.4019;1.5012,4.0631,4.1483;1.9928,3.272,3.5758;3.228,1.2844,2.0862;1.4087,2.0088,3.501;3.2028,3.5383,2.9319;3.8202,2.5409,2.1812;2.0325,.9953,2.7705;.4593,1.7886,3.9946;3.6508,4.5327,2.989;4.7489,2.7646,1.6507;3.7166,.2231,1.3011;4.7224,.2305,.4351;5.4197,1.0651,.5202;5.2967,-1.0448,-.0278;6.4797,-3.4406,-.8798;6.5872,-1.0466,-.5774;4.6123,-2.2633,.0947;5.1976,-3.4537,-.3271;7.1748,-2.2362,-.9986;7.1375,-.1061,-.6677;3.6195,-2.3125,.5474;4.65,-4.3918,-.1995;8.185,-2.2231,-1.4168;6.9438,-4.3763,-1.2039;1.5704,-.259,2.6716;.5537,-.2642,2.7057;-1.7494,3.5945,-.2871;4.0005,1.367,-1.4246;3.9934,.2508,-2.2601;3.0262,-.5896,-2.4002;1.3623,-1.0978,-2.3867;.2317,.3199,-2.8019;1.11,-1.8896,-.7294;1.3679,-2.3915,-3.7416;5.0962,-.0379,-2.9362;5.1647,-1.2604,-3.653;.0519,.9372,-1.9051;-.7434,-.0966,-3.1168;.6239,.9347,-3.6314;1.7382,-2.7926,-.6536;.0531,-2.1846,-.614;1.332,-1.1952,.0971;2.1152,-3.1787,-3.5377;.3771,-2.8771,-3.8058;1.5879,-1.9492,-4.7295;5.0009,-2.121,-2.9848;6.1798,-1.2996,-4.07;4.4214,-1.2765,-4.4669;-1.88,-3.472,1.1685;-.9371,-3.098,2.1343;.337,-3.652,2.1306;.652,-4.5947,1.1564;-.2859,-5.0429,.231;-1.5577,-4.4788,.2487;-1.18,-2.3014,2.8396;1.0986,-3.3157,2.8353;2.046,-5.0288,1.0202;-.0013,-5.7845,-.5161;-2.296,-4.7822,-.4986;-.7174,3.8789,-1.1914;.4254,4.5537,-.7826;.5204,4.9585,.5437;-.5071,4.7356,1.4552;-1.6367,4.0452,1.0353;-.7884,3.5123,-2.2186;1.2504,4.7469,-1.4688;1.7456,5.6197,.9976;-.4034,5.0838,2.4829;-2.432,3.8298,1.7508;2.3399,-5.6976,.0485;2.8424,-4.6606,1.8584;1.7116,6.2108,2.0556;2.732,5.5288,.2939;-5.5801,-2.5051,1.2139;-5.5169,-1.1893,.6696;-6.8367,-3.0316,1.6201;-7.9829,-2.2823,1.5166;-6.8723,-4.0461,2.0293;-8.943,-2.6959,1.8379;-6.7191,-.4318,.5954;-7.9176,-.9632,1.0074;-6.6787,.5908,.2132;-8.8274,-.3592,.948;-4.7638,.8664,-1.7484;-4.5153,2.094,-2.4303;-5.62,-.083,-2.3748;-6.2352,.1955,-3.5721;-5.7857,-1.0507,-1.8986;-6.8883,-.5524,-4.0308;-5.1778,2.3595,-3.6604;-6.0269,1.4367,-4.2191;-4.9875,3.3135,-4.1617;-6.5287,1.6501,-5.167;5.129,2.3585,-1.5926;5.1824,3.0324,-.7206;6.1065,1.8675,-1.7249;4.9647,3.0017,-2.478;2.6694,1.9169,-.9775;2.0719,2.2522,-1.8453;2.0404,1.2044,-.4179;2.8103,2.7951,-.3297;</scalar>
</formula>
</molecule>
                  <molecule cmlx:templateRef="atom" id="molecule-rot">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="-3.16273767" y3="-2.72383102" z3="1.04091973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="-4.44488345" y3="-4.28070563" z3="1.75053004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="-4.38533038" y3="-3.26242496" z3="1.35415058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="-4.25237375" y3="-0.6649596" z3="0.24331905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="-3.10883623" y3="-1.40073377" z3="0.50801031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="-3.20956242" y3="1.56075616" z3="-0.02089096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="-4.10886494" y3="0.62300715" z3="-0.49355529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="-3.56346894" y3="3.00709572" z3="-1.90573807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="-2.88521215" y3="2.75012339" z3="-0.73843146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="-3.3456506" y3="3.92105883" z3="-2.46703048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="-2.55815534" y3="1.31306719" z3="1.15002956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="-1.8843228" y3="-0.89922973" z3="0.19374916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="-1.2191437" y3="0.35018849" z3="1.08219506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.13876833" y3="0.93466016" z3="0.24335888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="-0.96937911" y3="-0.0943368" z3="2.50035385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="3.13482674" y3="-0.60891846" z3="1.40185439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.50116806" y3="4.06313001" z3="4.14826663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.99282047" y3="3.27196741" z3="3.57576394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="3.2280312" y3="1.28435694" z3="2.08624731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.40874872" y3="2.00879857" z3="3.50095276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="3.2028311" y3="3.53827178" z3="2.93193318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="3.82022666" y3="2.54091895" z3="2.18123579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="2.03252348" y3="0.99530033" z3="2.77049992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="0.45933465" y3="1.78857711" z3="3.99463241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="3.65082942" y3="4.53267196" z3="2.98899613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="4.74885019" y3="2.76458952" z3="1.65069165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="3.71656785" y3="0.22305432" z3="1.30110308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="4.72236243" y3="0.23045613" z3="0.43512267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="5.41969149" y3="1.06511305" z3="0.52016008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="5.29672628" y3="-1.04477131" z3="-0.0278354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="6.47974641" y3="-3.44064081" z3="-0.87982392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="6.58723364" y3="-1.04659164" z3="-0.57735435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="4.61232659" y3="-2.26332721" z3="0.09466416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="5.19759281" y3="-3.45365209" z3="-0.32712942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="7.17479374" y3="-2.23620916" z3="-0.99862896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="7.13751043" y3="-0.10605219" z3="-0.66773705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="3.61948769" y3="-2.31247628" z3="0.54741682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="4.64997767" y3="-4.39178644" z3="-0.19953582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="8.18503056" y3="-2.22307201" z3="-1.41682454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="6.9437963" y3="-4.37633338" z3="-1.20393525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.5703537" y3="-0.25901063" z3="2.67159975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="0.55365114" y3="-0.26418821" z3="2.70569837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="-1.74937472" y3="3.59452905" z3="-0.28706744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="4.00048794" y3="1.36697418" z3="-1.42461654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="3.99336188" y3="0.25081935" z3="-2.26006545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="3.02621639" y3="-0.5895664" z3="-2.40023839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="1.36225436" y3="-1.09776779" z3="-2.38672388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="0.23168189" y3="0.31988534" z3="-2.80194419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="1.11003242" y3="-1.88955068" z3="-0.7294431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="1.36786665" y3="-2.39148024" z3="-3.74157164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="5.09616161" y3="-0.03792516" z3="-2.93620444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="5.1646548" y3="-1.26043226" z3="-3.65304654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="0.05185851" y3="0.93717662" z3="-1.90510254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-0.74343742" y3="-0.09660882" z3="-3.11680129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="0.62386496" y3="0.93467556" z3="-3.63141117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="1.73815804" y3="-2.79262613" z3="-0.65363592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.05313386" y3="-2.18463579" z3="-0.61404182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="1.33198424" y3="-1.19517493" z3="0.0970855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="2.11523278" y3="-3.17868806" z3="-3.53768546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="0.37709128" y3="-2.87712031" z3="-3.8057943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="1.58793215" y3="-1.94921412" z3="-4.72951739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="5.00088635" y3="-2.12096631" z3="-2.98478443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="6.17977588" y3="-1.29963879" z3="-4.06996989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="4.42141554" y3="-1.2764834" z3="-4.46690876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="-1.88000872" y3="-3.47198307" z3="1.16852758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="-0.9371085" y3="-3.09796741" z3="2.13430181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="0.33699833" y3="-3.65202916" z3="2.13058898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="0.65201236" y3="-4.59469314" z3="1.15637876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="-0.28592264" y3="-5.04285968" z3="0.23102877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="-1.55765826" y3="-4.47882625" z3="0.24874769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="-1.18004243" y3="-2.30135992" z3="2.83963661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="1.09855861" y3="-3.3157048" z3="2.83533282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.0460487" y3="-5.02876599" z3="1.02017687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-0.00127261" y3="-5.78452745" z3="-0.51609061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="-2.29602361" y3="-4.78217475" z3="-0.4986008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.71737427" y3="3.87886871" z3="-1.19135063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="0.4253562" y3="4.55366692" z3="-0.78263294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="0.52036458" y3="4.95847823" z3="0.54369493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-0.50711826" y3="4.73558089" z3="1.45518903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-1.63665255" y3="4.04516445" z3="1.03530248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.78840879" y3="3.51230208" z3="-2.21864878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="1.25035765" y3="4.7469156" z3="-1.46881428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="1.74563806" y3="5.61968666" z3="0.99763006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.40338031" y3="5.083771" z3="2.48294811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="-2.43197923" y3="3.82984901" z3="1.75078133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.3399487" y3="-5.69757017" z3="0.04848595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="2.84244974" y3="-4.66062701" z3="1.8584393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="1.71163297" y3="6.21084979" z3="2.05562664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="2.73199566" y3="5.52879498" z3="0.29391838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="-5.58009565" y3="-2.50508806" z3="1.21389759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="-5.51692024" y3="-1.18926884" z3="0.66959002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="-6.83666597" y3="-3.03164329" z3="1.62009489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="-7.98292989" y3="-2.28234449" z3="1.51659178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="-6.87231301" y3="-4.04605441" z3="2.02926395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="-8.94295635" y3="-2.69585869" z3="1.83790866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="-6.71905652" y3="-0.43182799" z3="0.59539396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="-7.9175927" y3="-0.96315462" z3="1.00742834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="-6.67869146" y3="0.5908129" z3="0.21320053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="-8.82743299" y3="-0.35920398" z3="0.94795914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="-4.76376117" y3="0.86635096" z3="-1.74843162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="-4.51525456" y3="2.09399857" z3="-2.43030621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="-5.62001379" y3="-0.08304264" z3="-2.37482096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="-6.23515359" y3="0.19549998" z3="-3.57214251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="-5.78572076" y3="-1.05067898" z3="-1.89861639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="-6.88832974" y3="-0.55236187" z3="-4.03077115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="-5.17782066" y3="2.35946587" z3="-3.66036705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="-6.02688534" y3="1.43667129" z3="-4.21910716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="-4.98745681" y3="3.3135268" z3="-4.16166225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="-6.52873941" y3="1.65005405" z3="-5.16701246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="5.12901899" y3="2.35853601" z3="-1.59261399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="5.18242355" y3="3.03238028" z3="-0.72064188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="6.10653603" y3="1.86749596" z3="-1.72485449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="4.96466973" y3="3.00168333" z3="-2.47797664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="2.66937593" y3="1.91686853" z3="-0.97745286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="2.07193396" y3="2.25224987" z3="-1.84525838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="2.04036459" y3="1.20440616" z3="-0.41791407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="2.81031508" y3="2.79511387" z3="-0.32968223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:-3.1627,-2.7238,1.0409;-4.4449,-4.2807,1.7505;-4.3853,-3.2624,1.3542;-4.2524,-.665,.2433;-3.1088,-1.4007,.508;-3.2096,1.5608,-.0209;-4.1089,.623,-.4936;-3.5635,3.0071,-1.9057;-2.8852,2.7501,-.7384;-3.3457,3.9211,-2.467;-2.5582,1.3131,1.15;-1.8843,-.8992,.1937;-1.2191,.3502,1.0822;-.1388,.9347,.2434;-.9694,-.0943,2.5004;3.1348,-.6089,1.4019;1.5012,4.0631,4.1483;1.9928,3.272,3.5758;3.228,1.2844,2.0862;1.4087,2.0088,3.501;3.2028,3.5383,2.9319;3.8202,2.5409,2.1812;2.0325,.9953,2.7705;.4593,1.7886,3.9946;3.6508,4.5327,2.989;4.7489,2.7646,1.6507;3.7166,.2231,1.3011;4.7224,.2305,.4351;5.4197,1.0651,.5202;5.2967,-1.0448,-.0278;6.4797,-3.4406,-.8798;6.5872,-1.0466,-.5774;4.6123,-2.2633,.0947;5.1976,-3.4537,-.3271;7.1748,-2.2362,-.9986;7.1375,-.1061,-.6677;3.6195,-2.3125,.5474;4.65,-4.3918,-.1995;8.185,-2.2231,-1.4168;6.9438,-4.3763,-1.2039;1.5704,-.259,2.6716;.5537,-.2642,2.7057;-1.7494,3.5945,-.2871;4.0005,1.367,-1.4246;3.9934,.2508,-2.2601;3.0262,-.5896,-2.4002;1.3623,-1.0978,-2.3867;.2317,.3199,-2.8019;1.11,-1.8896,-.7294;1.3679,-2.3915,-3.7416;5.0962,-.0379,-2.9362;5.1647,-1.2604,-3.653;.0519,.9372,-1.9051;-.7434,-.0966,-3.1168;.6239,.9347,-3.6314;1.7382,-2.7926,-.6536;.0531,-2.1846,-.614;1.332,-1.1952,.0971;2.1152,-3.1787,-3.5377;.3771,-2.8771,-3.8058;1.5879,-1.9492,-4.7295;5.0009,-2.121,-2.9848;6.1798,-1.2996,-4.07;4.4214,-1.2765,-4.4669;-1.88,-3.472,1.1685;-.9371,-3.098,2.1343;.337,-3.652,2.1306;.652,-4.5947,1.1564;-.2859,-5.0429,.231;-1.5577,-4.4788,.2487;-1.18,-2.3014,2.8396;1.0986,-3.3157,2.8353;2.046,-5.0288,1.0202;-.0013,-5.7845,-.5161;-2.296,-4.7822,-.4986;-.7174,3.8789,-1.1914;.4254,4.5537,-.7826;.5204,4.9585,.5437;-.5071,4.7356,1.4552;-1.6367,4.0452,1.0353;-.7884,3.5123,-2.2186;1.2504,4.7469,-1.4688;1.7456,5.6197,.9976;-.4034,5.0838,2.4829;-2.432,3.8298,1.7508;2.3399,-5.6976,.0485;2.8424,-4.6606,1.8584;1.7116,6.2108,2.0556;2.732,5.5288,.2939;-5.5801,-2.5051,1.2139;-5.5169,-1.1893,.6696;-6.8367,-3.0316,1.6201;-7.9829,-2.2823,1.5166;-6.8723,-4.0461,2.0293;-8.943,-2.6959,1.8379;-6.7191,-.4318,.5954;-7.9176,-.9632,1.0074;-6.6787,.5908,.2132;-8.8274,-.3592,.948;-4.7638,.8664,-1.7484;-4.5153,2.094,-2.4303;-5.62,-.083,-2.3748;-6.2352,.1955,-3.5721;-5.7857,-1.0507,-1.8986;-6.8883,-.5524,-4.0308;-5.1778,2.3595,-3.6604;-6.0269,1.4367,-4.2191;-4.9875,3.3135,-4.1617;-6.5287,1.6501,-5.167;5.129,2.3585,-1.5926;5.1824,3.0324,-.7206;6.1065,1.8675,-1.7249;4.9647,3.0017,-2.478;2.6694,1.9169,-.9775;2.0719,2.2522,-1.8453;2.0404,1.2044,-.4179;2.8103,2.7951,-.3297;</scalar>
</formula>
</molecule>
               </property>
               <property dictRef="cc:thermochemistry">
                  <module cmlx:templateRef="thermo">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                     <list cmlx:templateRef="state"/>
                     <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650430148929</scalar>
                     <scalar cmlx:templateRef="zpe" dataType="xsd:double" dictRef="cc:zpe.correction" units="nonsi:hartree">0.923772957915</scalar>
                     <scalar cmlx:templateRef="elec-zpe" dataType="xsd:double" dictRef="cc:zpe.sumelectzpe" units="nonsi:hartree">-3666.726657191014</scalar>
                     <scalar cmlx:templateRef="thermal-tr" dataType="xsd:double" dictRef="cc:ethermo.trans" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-rot" dataType="xsd:double" dictRef="cc:ethermo.rot" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-vib" dataType="xsd:double" dictRef="cc:ethermo.vib" units="nonsi:hartree">0.981646209683</scalar>
                     <scalar cmlx:templateRef="enthalpy-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrenthalpy" units="nonsi:hartree">0.985422947960</scalar>
                     <scalar cmlx:templateRef="enthalpy" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalent" units="nonsi:hartree">-3666.665007200969</scalar>
                     <scalar cmlx:templateRef="entropy-el" dataType="xsd:double" dictRef="cc:s.elect" units="nonsi2:hartree.K-1">0.000000000000</scalar>
                     <scalar cmlx:templateRef="entropy-tr" dataType="xsd:double" dictRef="cc:s.trans" units="nonsi2:hartree.K-1">0.000074044432</scalar>
                     <scalar cmlx:templateRef="entropy-rot" dataType="xsd:double" dictRef="cc:s.rot" units="nonsi2:hartree.K-1">0.000064535926</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber" units="nonsi2:hartree.K-1">1</scalar>
                     <list cmlx:templateRef="entropy-rot"/>
                     <scalar cmlx:templateRef="entropy-vib" dataType="xsd:double" dictRef="cc:s.vib" units="nonsi2:hartree.K-1">0.000375773518</scalar>
                     <scalar cmlx:templateRef="gibbs-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrgfe" units="nonsi:hartree">0.832068340073</scalar>
                     <scalar cmlx:templateRef="gibbs" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalfe" units="nonsi:hartree">-3666.818361808856</scalar>
                  </module>
                  <module cmlx:templateRef="thermo">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                     <list cmlx:templateRef="state"/>
                     <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650430148929</scalar>
                     <scalar cmlx:templateRef="zpe" dataType="xsd:double" dictRef="cc:zpe.correction" units="nonsi:hartree">0.923772957915</scalar>
                     <scalar cmlx:templateRef="elec-zpe" dataType="xsd:double" dictRef="cc:zpe.sumelectzpe" units="nonsi:hartree">-3666.726657191014</scalar>
                     <scalar cmlx:templateRef="thermal-tr" dataType="xsd:double" dictRef="cc:ethermo.trans" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-rot" dataType="xsd:double" dictRef="cc:ethermo.rot" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-vib" dataType="xsd:double" dictRef="cc:ethermo.vib" units="nonsi:hartree">0.981646209683</scalar>
                     <scalar cmlx:templateRef="enthalpy-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrenthalpy" units="nonsi:hartree">0.985422947960</scalar>
                     <scalar cmlx:templateRef="enthalpy" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalent" units="nonsi:hartree">-3666.665007200969</scalar>
                     <scalar cmlx:templateRef="entropy-el" dataType="xsd:double" dictRef="cc:s.elect" units="nonsi2:hartree.K-1">0.000000000000</scalar>
                     <scalar cmlx:templateRef="entropy-tr" dataType="xsd:double" dictRef="cc:s.trans" units="nonsi2:hartree.K-1">0.000074044432</scalar>
                     <scalar cmlx:templateRef="entropy-rot" dataType="xsd:double" dictRef="cc:s.rot" units="nonsi2:hartree.K-1">0.000064535926</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber" units="nonsi2:hartree.K-1">1</scalar>
                     <list cmlx:templateRef="entropy-rot"/>
                     <scalar cmlx:templateRef="entropy-vib" dataType="xsd:double" dictRef="cc:s.vib" units="nonsi2:hartree.K-1">0.000375773518</scalar>
                     <scalar cmlx:templateRef="gibbs-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrgfe" units="nonsi:hartree">0.832068340073</scalar>
                     <scalar cmlx:templateRef="gibbs" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalfe" units="nonsi:hartree">-3666.818361808856</scalar>
                  </module>
               </property>
            </propertyList>
            <molecule cmlx:templateRef="atom" id="molecule">
               <atomArray>
                  <atom elementType="C" id="a1" x3="5.33936122" y3="0.05210134" z3="-0.19201567">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a2" x3="7.38530745" y3="0.16754932" z3="0.41796705">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a3" x3="6.64653325" y3="0.44189871" z3="-0.34131147">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a4" x3="4.72935583" y3="1.23657266" z3="-2.26260648">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a5" x3="4.38821659" y3="0.43608268" z3="-1.18467189">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a6" x3="2.73016597" y3="0.84593451" z3="-3.66321875">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a7" x3="3.63541618" y3="1.74849122" z3="-3.13648995">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a8" x3="1.38411338" y3="2.59076799" z3="-4.61898814">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a9" x3="1.5628721" y3="1.24988615" z3="-4.37659803">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a10" x3="0.50540095" y3="2.92605673" z3="-5.17869206">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="O" id="a11" x3="2.9255244" y3="-0.4842712" z3="-3.44157998">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a12" x3="3.0977608" y3="0.04732628" z3="-1.00221143">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="P" id="a13" x3="2.40074172" y3="-1.09667082" z3="-2.0013512">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                  </atom>
                  <atom elementType="O" id="a14" x3="0.92915666" y3="-0.96587593" z3="-1.82874093">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a15" x3="3.10280291" y3="-2.42112024" z3="-1.84609895">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="H" id="a16" x3="-0.14270182" y3="-3.61647334" z3="0.67458172">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a17" x3="-0.01401538" y3="-5.24800316" z3="-4.74401663">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a18" x3="-0.24260361" y3="-4.99271175" z3="-3.70575202">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a19" x3="-0.84080375" y3="-4.30774056" z3="-1.08507047">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a20" x3="0.78155449" y3="-4.58365216" z3="-2.85363556">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a21" x3="-1.55822493" y3="-5.08579129" z3="-3.24745241">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a22" x3="-1.85816246" y3="-4.73802612" z3="-1.9327154">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a23" x3="0.49450175" y3="-4.25595713" z3="-1.52696617">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a24" x3="1.81412724" y3="-4.50047737" z3="-3.20073733">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a25" x3="-2.35672361" y3="-5.40008264" z3="-3.92303453">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a26" x3="-2.89449963" y3="-4.77903703" z3="-1.58895584">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="N" id="a27" x3="-1.03082012" y3="-3.86121164" z3="0.2362881">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                  </atom>
                  <atom elementType="C" id="a28" x3="-2.17136604" y3="-3.65010467" z3="0.8814148">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a29" x3="-3.05845144" y3="-4.11362585" z3="0.44738836">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a30" x3="-2.16645718" y3="-3.51613033" z3="2.34853982">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a31" x3="-2.22467206" y3="-3.33395224" z3="5.1465809">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a32" x3="-3.36233989" y3="-3.72319725" z3="3.05165537">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a33" x3="-0.99954734" y3="-3.22403112" z3="3.07054191">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a34" x3="-1.02596091" y3="-3.13349287" z3="4.45921929">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a35" x3="-3.39053805" y3="-3.6343233" z3="4.44061012">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a36" x3="-4.27712547" y3="-3.96372538" z3="2.50311038">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a37" x3="-0.04018097" y3="-3.08867161" z3="2.56613765">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a38" x3="-0.09697148" y3="-2.92612394" z3="4.99795419">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a39" x3="-4.32841645" y3="-3.80708099" z3="4.97556568">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a40" x3="-2.24486324" y3="-3.2712127" z3="6.23817016">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="O" id="a41" x3="1.41413931" y3="-3.8904338" z3="-0.62289893">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="H" id="a42" x3="2.17365316" y3="-3.3874246" z3="-1.07566165">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a43" x3="0.52209458" y3="0.24466742" z3="-4.71304202">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a44" x3="-3.08217857" y3="-1.7243933" z3="0.02499071">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a45" x3="-2.90688563" y3="-0.97398886" z3="1.18688263">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="O" id="a46" x3="-1.84598039" y3="-0.32217646" z3="1.5198807">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="Si" id="a47" x3="-0.3721003" y3="0.55282144" z3="1.22108799">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                  </atom>
                  <atom elementType="C" id="a48" x3="-0.45248276" y3="1.45324912" z3="-0.40467677">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a49" x3="0.98143453" y3="-0.7017263" z3="1.39763566">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a50" x3="-0.35923703" y3="1.74450565" z3="2.66644578">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="O" id="a51" x3="-3.88113431" y3="-0.96598161" z3="2.08548152">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="C" id="a52" x3="-3.65233139" y3="-0.35279977" z3="3.34434401">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a53" x3="-0.21276844" y3="0.76407547" z3="-1.23249719">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a54" x3="0.32025201" y3="2.24465185" z3="-0.39990809">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a55" x3="-1.43331485" y3="1.93513644" z3="-0.56449882">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a56" x3="1.0117666" y3="-1.06644444" z3="2.4377772">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a57" x3="1.95350952" y3="-0.23779872" z3="1.15832694">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a58" x3="0.85688366" y3="-1.54363347" z3="0.69745767">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a59" x3="-0.41419065" y3="1.20467753" z3="3.62841645">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a60" x3="0.57643666" y3="2.3328218" z3="2.66409836">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a61" x3="-1.20201117" y3="2.45684042" z3="2.61770263">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a62" x3="-2.7899269" y3="-0.80914938" z3="3.85612204">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a63" x3="-4.56693185" y3="-0.52754735" z3="3.92641128">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a64" x3="-3.48204217" y3="0.72966361" z3="3.22472567">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a65" x3="4.83906355" y3="-0.70406819" z3="0.99091235">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a66" x3="4.41460168" y3="-2.03163702" z3="0.85284884">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a67" x3="3.76204455" y3="-2.67756927" z3="1.89557946">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a68" x3="3.55086259" y3="-1.98297957" z3="3.08296403">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a69" x3="4.02773204" y3="-0.69010022" z3="3.27765979">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a70" x3="4.68009159" y3="-0.05765099" z3="2.22400227">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a71" x3="4.52111583" y3="-2.53034435" z3="-0.11205702">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a72" x3="3.36694347" y3="-3.68677417" z3="1.77248351">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="N" id="a73" x3="2.6889607" y3="-2.58259688" z3="4.10662985">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                  </atom>
                  <atom elementType="H" id="a74" x3="3.84378486" y3="-0.17936098" z3="4.22348902">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a75" x3="5.02188884" y3="0.97466542" z3="2.33902808">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a76" x3="-0.79426414" y3="0.46596225" z3="-4.28662627">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a77" x3="-1.77491002" y3="-0.5011998" z3="-4.46316783">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a78" x3="-1.42872113" y3="-1.69323407" z3="-5.08866919">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a79" x3="-0.14309954" y3="-1.92496894" z3="-5.56794132">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a80" x3="0.83055168" y3="-0.95470642" z3="-5.36939356">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a81" x3="-1.0376784" y3="1.38957853" z3="-3.75517454">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a82" x3="-2.7930357" y3="-0.35449283" z3="-4.10162329">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="N" id="a83" x3="-2.4416316" y3="-2.74166016" z3="-5.22782356">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                  </atom>
                  <atom elementType="H" id="a84" x3="0.08590768" y3="-2.86550767" z3="-6.06916904">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a85" x3="1.85177313" y3="-1.1411941" z3="-5.70576291">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="O" id="a86" x3="2.35703153" y3="-1.88773354" z3="5.04729315">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a87" x3="2.31476793" y3="-3.72474316" z3="3.93945789">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a88" x3="-2.219957" y3="-3.64354447" z3="-6.00721562">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a89" x3="-3.44306931" y3="-2.65548616" z3="-4.54513087">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="C" id="a90" x3="7.07221794" y3="1.1625302" z3="-1.49030099">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a91" x3="6.11264874" y3="1.55159646" z3="-2.4698399">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a92" x3="8.44146416" y3="1.49054795" z3="-1.68726484">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a93" x3="8.85296381" y3="2.15476087" z3="-2.816677">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a94" x3="9.16683759" y3="1.1926779" z3="-0.92383393">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a95" x3="9.9098219" y3="2.39637053" z3="-2.96008232">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a96" x3="6.57445286" y3="2.21982283" z3="-3.63798536">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a97" x3="7.90651503" y3="2.5126592" z3="-3.80658697">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a98" x3="5.85409185" y3="2.49199138" z3="-4.41290461">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a99" x3="8.23910545" y3="3.02026399" z3="-4.71643494">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a100" x3="3.4056348" y3="3.15216087" z3="-3.33581861">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a101" x3="2.29105517" y3="3.56420899" z3="-4.12433351">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a102" x3="4.21367207" y3="4.16348421" z3="-2.74321315">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a103" x3="3.96410111" y3="5.49622953" z3="-2.96919126">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a104" x3="5.04164218" y3="3.87509001" z3="-2.09371797">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a105" x3="4.60129973" y3="6.25209054" z3="-2.50129309">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a106" x3="2.06734173" y3="4.9500599" z3="-4.35211839">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a107" x3="2.88834523" y3="5.89917092" z3="-3.79552816">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a108" x3="1.21650857" y3="5.24735117" z3="-4.97297938">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a109" x3="2.70516798" y3="6.96228586" z3="-3.97482366">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a110" x3="-4.4801925" y3="-2.20294022" z3="-0.29367878">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a111" x3="-4.45041598" y3="-2.99472778" z3="-1.0614283">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a112" x3="-5.00810626" y3="-2.58623535" z3="0.5943186">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a113" x3="-5.09567787" y3="-1.38319299" z3="-0.71046219">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a114" x3="-2.17922384" y3="-1.42617658" z3="-1.14545275">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a115" x3="-2.31655446" y3="-0.3851156" z3="-1.49162659">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a116" x3="-1.10266334" y3="-1.55120404" z3="-0.94118045">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a117" x3="-2.42026583" y3="-2.07925309" z3="-1.99761196">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a65" order="S"/>
                  <bond atomRefs2="a1 a3" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a90" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a91" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a9" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a11" order="S"/>
                  <bond atomRefs2="a7 a100" order="S"/>
                  <bond atomRefs2="a8 a101" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a10" order="S"/>
                  <bond atomRefs2="a9 a43" order="S"/>
                  <bond atomRefs2="a11 a13" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a16 a27" order="S"/>
                  <bond atomRefs2="a17 a18" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a23" order="S"/>
                  <bond atomRefs2="a19 a27" order="S"/>
                  <bond atomRefs2="a19 a22" order="S"/>
                  <bond atomRefs2="a20 a24" order="S"/>
                  <bond atomRefs2="a20 a23" order="S"/>
                  <bond atomRefs2="a21 a22" order="S"/>
                  <bond atomRefs2="a21 a25" order="S"/>
                  <bond atomRefs2="a22 a26" order="S"/>
                  <bond atomRefs2="a23 a41" order="S"/>
                  <bond atomRefs2="a27 a28" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a30" order="S"/>
                  <bond atomRefs2="a30 a33" order="S"/>
                  <bond atomRefs2="a30 a32" order="S"/>
                  <bond atomRefs2="a31 a35" order="S"/>
                  <bond atomRefs2="a31 a40" order="S"/>
                  <bond atomRefs2="a31 a34" order="S"/>
                  <bond atomRefs2="a32 a35" order="S"/>
                  <bond atomRefs2="a32 a36" order="S"/>
                  <bond atomRefs2="a33 a34" order="S"/>
                  <bond atomRefs2="a33 a37" order="S"/>
                  <bond atomRefs2="a34 a38" order="S"/>
                  <bond atomRefs2="a35 a39" order="S"/>
                  <bond atomRefs2="a41 a42" order="S"/>
                  <bond atomRefs2="a43 a80" order="S"/>
                  <bond atomRefs2="a43 a76" order="S"/>
                  <bond atomRefs2="a44 a110" order="S"/>
                  <bond atomRefs2="a44 a45" order="S"/>
                  <bond atomRefs2="a44 a114" order="S"/>
                  <bond atomRefs2="a45 a51" order="S"/>
                  <bond atomRefs2="a45 a46" order="S"/>
                  <bond atomRefs2="a46 a47" order="S"/>
                  <bond atomRefs2="a47 a48" order="S"/>
                  <bond atomRefs2="a47 a50" order="S"/>
                  <bond atomRefs2="a47 a49" order="S"/>
                  <bond atomRefs2="a48 a54" order="S"/>
                  <bond atomRefs2="a48 a53" order="S"/>
                  <bond atomRefs2="a48 a55" order="S"/>
                  <bond atomRefs2="a49 a58" order="S"/>
                  <bond atomRefs2="a49 a56" order="S"/>
                  <bond atomRefs2="a49 a57" order="S"/>
                  <bond atomRefs2="a50 a61" order="S"/>
                  <bond atomRefs2="a50 a59" order="S"/>
                  <bond atomRefs2="a50 a60" order="S"/>
                  <bond atomRefs2="a51 a52" order="S"/>
                  <bond atomRefs2="a52 a62" order="S"/>
                  <bond atomRefs2="a52 a63" order="S"/>
                  <bond atomRefs2="a52 a64" order="S"/>
                  <bond atomRefs2="a65 a66" order="S"/>
                  <bond atomRefs2="a65 a70" order="S"/>
                  <bond atomRefs2="a66 a67" order="S"/>
                  <bond atomRefs2="a66 a71" order="S"/>
                  <bond atomRefs2="a67 a68" order="S"/>
                  <bond atomRefs2="a67 a72" order="S"/>
                  <bond atomRefs2="a68 a69" order="S"/>
                  <bond atomRefs2="a68 a73" order="S"/>
                  <bond atomRefs2="a69 a74" order="S"/>
                  <bond atomRefs2="a69 a70" order="S"/>
                  <bond atomRefs2="a70 a75" order="S"/>
                  <bond atomRefs2="a73 a86" order="S"/>
                  <bond atomRefs2="a73 a87" order="S"/>
                  <bond atomRefs2="a76 a81" order="S"/>
                  <bond atomRefs2="a76 a77" order="S"/>
                  <bond atomRefs2="a77 a78" order="S"/>
                  <bond atomRefs2="a77 a82" order="S"/>
                  <bond atomRefs2="a78 a79" order="S"/>
                  <bond atomRefs2="a78 a83" order="S"/>
                  <bond atomRefs2="a79 a84" order="S"/>
                  <bond atomRefs2="a79 a80" order="S"/>
                  <bond atomRefs2="a80 a85" order="S"/>
                  <bond atomRefs2="a83 a88" order="S"/>
                  <bond atomRefs2="a83 a89" order="S"/>
                  <bond atomRefs2="a90 a91" order="S"/>
                  <bond atomRefs2="a90 a92" order="S"/>
                  <bond atomRefs2="a91 a96" order="S"/>
                  <bond atomRefs2="a92 a93" order="S"/>
                  <bond atomRefs2="a92 a94" order="S"/>
                  <bond atomRefs2="a93 a95" order="S"/>
                  <bond atomRefs2="a93 a97" order="S"/>
                  <bond atomRefs2="a96 a97" order="S"/>
                  <bond atomRefs2="a96 a98" order="S"/>
                  <bond atomRefs2="a97 a99" order="S"/>
                  <bond atomRefs2="a100 a101" order="S"/>
                  <bond atomRefs2="a100 a102" order="S"/>
                  <bond atomRefs2="a101 a106" order="S"/>
                  <bond atomRefs2="a102 a103" order="S"/>
                  <bond atomRefs2="a102 a104" order="S"/>
                  <bond atomRefs2="a103 a105" order="S"/>
                  <bond atomRefs2="a103 a107" order="S"/>
                  <bond atomRefs2="a106 a107" order="S"/>
                  <bond atomRefs2="a106 a108" order="S"/>
                  <bond atomRefs2="a107 a109" order="S"/>
                  <bond atomRefs2="a110 a113" order="S"/>
                  <bond atomRefs2="a110 a111" order="S"/>
                  <bond atomRefs2="a110 a112" order="S"/>
                  <bond atomRefs2="a114 a117" order="S"/>
                  <bond atomRefs2="a114 a115" order="S"/>
                  <bond atomRefs2="a114 a116" order="S"/>
               </bondArray>
               <formula concise="C53H48N3O11PSi">
                  <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">913.639861000001</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.3394,.0521,-.192;7.3853,.1675,.418;6.6465,.4419,-.3413;4.7294,1.2366,-2.2626;4.3882,.4361,-1.1847;2.7302,.8459,-3.6632;3.6354,1.7485,-3.1365;1.3841,2.5908,-4.619;1.5629,1.2499,-4.3766;.5054,2.9261,-5.1787;2.9255,-.4843,-3.4416;3.0978,.0473,-1.0022;2.4007,-1.0967,-2.0014;.9292,-.9659,-1.8287;3.1028,-2.4211,-1.8461;-.1427,-3.6165,.6746;-.014,-5.248,-4.744;-.2426,-4.9927,-3.7058;-.8408,-4.3077,-1.0851;.7816,-4.5837,-2.8536;-1.5582,-5.0858,-3.2475;-1.8582,-4.738,-1.9327;.4945,-4.256,-1.527;1.8141,-4.5005,-3.2007;-2.3567,-5.4001,-3.923;-2.8945,-4.779,-1.589;-1.0308,-3.8612,.2363;-2.1714,-3.6501,.8814;-3.0585,-4.1136,.4474;-2.1665,-3.5161,2.3485;-2.2247,-3.334,5.1466;-3.3623,-3.7232,3.0517;-.9995,-3.224,3.0705;-1.026,-3.1335,4.4592;-3.3905,-3.6343,4.4406;-4.2771,-3.9637,2.5031;-.0402,-3.0887,2.5661;-.097,-2.9261,4.998;-4.3284,-3.8071,4.9756;-2.2449,-3.2712,6.2382;1.4141,-3.8904,-.6229;2.1737,-3.3874,-1.0757;.5221,.2447,-4.713;-3.0822,-1.7244,.025;-2.9069,-.974,1.1869;-1.846,-.3222,1.5199;-.3721,.5528,1.2211;-.4525,1.4532,-.4047;.9814,-.7017,1.3976;-.3592,1.7445,2.6664;-3.8811,-.966,2.0855;-3.6523,-.3528,3.3443;-.2128,.7641,-1.2325;.3203,2.2447,-.3999;-1.4333,1.9351,-.5645;1.0118,-1.0664,2.4378;1.9535,-.2378,1.1583;.8569,-1.5436,.6975;-.4142,1.2047,3.6284;.5764,2.3328,2.6641;-1.202,2.4568,2.6177;-2.7899,-.8091,3.8561;-4.5669,-.5275,3.9264;-3.482,.7297,3.2247;4.8391,-.7041,.9909;4.4146,-2.0316,.8528;3.762,-2.6776,1.8956;3.5509,-1.983,3.083;4.0277,-.6901,3.2777;4.6801,-.0577,2.224;4.5211,-2.5303,-.1121;3.3669,-3.6868,1.7725;2.689,-2.5826,4.1066;3.8438,-.1794,4.2235;5.0219,.9747,2.339;-.7943,.466,-4.2866;-1.7749,-.5012,-4.4632;-1.4287,-1.6932,-5.0887;-.1431,-1.925,-5.5679;.8306,-.9547,-5.3694;-1.0377,1.3896,-3.7552;-2.793,-.3545,-4.1016;-2.4416,-2.7417,-5.2278;.0859,-2.8655,-6.0692;1.8518,-1.1412,-5.7058;2.357,-1.8877,5.0473;2.3148,-3.7247,3.9395;-2.22,-3.6435,-6.0072;-3.4431,-2.6555,-4.5451;7.0722,1.1625,-1.4903;6.1126,1.5516,-2.4698;8.4415,1.4905,-1.6873;8.853,2.1548,-2.8167;9.1668,1.1927,-.9238;9.9098,2.3964,-2.9601;6.5745,2.2198,-3.638;7.9065,2.5127,-3.8066;5.8541,2.492,-4.4129;8.2391,3.0203,-4.7164;3.4056,3.1522,-3.3358;2.2911,3.5642,-4.1243;4.2137,4.1635,-2.7432;3.9641,5.4962,-2.9692;5.0416,3.8751,-2.0937;4.6013,6.2521,-2.5013;2.0673,4.9501,-4.3521;2.8883,5.8992,-3.7955;1.2165,5.2474,-4.973;2.7052,6.9623,-3.9748;-4.4802,-2.2029,-.2937;-4.4504,-2.9947,-1.0614;-5.0081,-2.5862,.5943;-5.0957,-1.3832,-.7105;-2.1792,-1.4262,-1.1455;-2.3166,-.3851,-1.4916;-1.1027,-1.5512,-.9412;-2.4203,-2.0793,-1.9976;</scalar>
</formula>
</molecule>
            <module dictRef="energy.info" id="energy.info1">
               <scalar cmlx:templateRef="symmetry-group" dataType="xsd:string" dictRef="cc:pointgroup">--</scalar>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.650430148929</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array cmlx:templateRef="gradient-vector" dataType="xsd:double" dictRef="cc:grad" size="351">-0.000005794550 -0.000004976878 0.000001019217 -0.000002176949 0.000000639291 -0.000000901044 0.000005258220 0.000004152113 0.000002308053 -0.000000234879 0.000001155127 -0.000001737638 -0.000001130875 -0.000001572154 0.000001763699 -0.000000858289 -0.000000475359 -0.000000352802 0.000000561704 0.000003651045 0.000000973881 -0.000001499806 -0.000004158575 -0.000001269101 -0.000001815635 -0.000001138120 -0.000001571685 0.000000261559 -0.000001014666 -0.000000277730 -0.000000149114 -0.000000411712 -0.000000448236 0.000001936631 0.000001127544 0.000000214540 0.000000588824 -0.000001249816 0.000000545284 -0.000000525674 -0.000000516348 0.000000712051 0.000000112499 0.000001193759 -0.000000228919 0.000006768473 -0.000001855417 0.000001960419 0.000000542287 0.000000003730 0.000000805393 0.000001936980 -0.000000920550 0.000000291756 -0.000002451889 -0.000000308527 0.000000085359 0.000002194600 -0.000000764042 -0.000001508662 -0.000001926027 -0.000000296352 -0.000000607324 0.000001930004 -0.000000306317 0.000001412392 0.000003531712 -0.000000714502 0.000000164370 -0.000002656068 -0.000000094487 0.000001198147 0.000004729002 -0.000000300343 0.000002896474 0.000001608270 -0.000000353169 0.000000222709 -0.000009240507 0.000001067678 -0.000001068607 -0.000004137114 -0.000003292095 -0.000003546593 0.000006035961 0.000000828180 0.000001993368 -0.000005071226 -0.000000304640 -0.000002412723 0.000003014487 0.000000100627 0.000002673739 -0.000006006551 -0.000000201538 -0.000003149157 0.000004664144 0.000000223891 0.000002815633 0.000008658418 0.000000350114 0.000003313052 -0.000004203616 0.000000135179 -0.000001107471 0.000005312870 -0.000000761194 0.000002384585 0.000000920154 0.000000797109 0.000000474774 -0.000006306305 0.000001369270 -0.000002995196 0.000001362829 -0.000000166251 -0.000000999778 0.000000065732 0.000000797022 -0.000000495955 -0.000003225310 -0.000001905674 -0.000000332502 0.000001806892 0.000000804062 -0.000000758161 -0.000003477121 0.000000337269 0.000002545813 -0.000000342303 0.000001177886 0.000000588030 -0.000001314902 0.000000150869 0.000001189761 -0.000001336806 -0.000001552189 -0.000000778253 0.000001264296 0.000000357621 -0.000000304645 0.000000794498 0.000001965258 -0.000000096041 0.000000662585 -0.000000929800 -0.000005267468 -0.000000479793 0.000003241818 -0.000001743520 0.000001714415 0.000000156380 -0.000000123755 -0.000003751864 0.000000054862 -0.000001038578 -0.000000070515 -0.000000253328 -0.000000089495 -0.000001965234 -0.000002469256 -0.000000335668 0.000000601734 0.000000166515 -0.000000893377 0.000000074559 -0.000001243524 0.000003302502 -0.000001231671 0.000000629840 -0.000000029328 0.000000970624 0.000005519647 0.000002501867 -0.000001170764 0.000000114676 0.000000669010 -0.000004371220 -0.000002014804 -0.000001447346 0.000002443006 -0.000001342520 -0.000000404498 0.000000645053 -0.000001721232 -0.000000704570 0.000002005485 0.000000101898 -0.000003083525 -0.000001034849 0.000000182638 -0.000001157651 -0.000001623707 -0.000000273506 0.000003976537 0.000003892077 0.000009703650 0.000013460730 0.000002345706 0.000005965325 0.000006570745 0.000000654077 0.000001298770 -0.000003406407 -0.000002780480 -0.000006096606 -0.000008995854 -0.000001266163 -0.000002198860 -0.000008152298 0.000000085759 -0.000001984140 -0.000008258237 -0.000001618782 -0.000001794364 -0.000000027257 -0.000003106834 -0.000003798793 -0.000000455544 -0.000001064865 0.000004000724 0.000009006824 -0.000000629634 0.000000227128 -0.000000197698 0.000002308713 -0.000000361185 -0.000000534939 -0.000001498356 -0.000003759007 -0.000000444853 0.000003475593 0.000001434744 0.000000027025 -0.000003154696 -0.000000418083 0.000000496281 0.000001060410 0.000001646981 0.000000365977 -0.000000242552 -0.000001847079 -0.000000355822 0.000002764666 -0.000001942284 -0.000001080254 0.000008254949 0.000006814502 -0.000003977718 0.000000158365 0.000000347285 0.000000602956 -0.000001532365 0.000000860205 0.000001244632 0.000000177713 -0.000003379650 -0.000000895986 0.000002528517 0.000011300296 0.000003094821 0.000002985385 -0.000016826729 -0.000006533636 -0.000009555310 0.000007497145 0.000008905006 0.000002328935 0.000002552375 -0.000001087949 0.000002481115 0.000003885789 -0.000001493592 -0.000003937730 -0.000000953848 0.000002674153 0.000001100548 0.000000836340 -0.000000464839 -0.000000732440 0.000001595002 0.000000574485 0.000000477829 0.000001919487 0.000000674261 -0.000003255114 -0.000003730051 0.000001540190 0.000003523420 0.000006942278 -0.000004468675 -0.000000524116 0.000000131406 0.000000014085 -0.000002011907 -0.000004838010 0.000005449715 0.000000818118 0.000000258668 0.000000923129 0.000002351425 0.000001105807 0.000000937925 0.000001239502 -0.000005120291 -0.000002261052 -0.000002423518 0.000003282890 0.000000567919 -0.000001070586 0.000000633437 -0.000000209067 -0.000000628682 -0.000000524011 -0.000000761351 0.000000080511 0.000004922634 0.000002495297 -0.000000488613 -0.000004996909 -0.000003181394 0.000000348731 -0.000000980546 -0.000000642652 -0.000000822558 -0.000000017328 -0.000000504012 0.000000054205 0.000001318339 -0.000001925587 0.000001016528 -0.000001286790 -0.000000485167 -0.000000875840 -0.000001767984 0.000001058202 0.000001915138 -0.000001722429 0.000000144612 0.000004944974 -0.000007697517 0.000000336134 0.000001411357 0.000005201011 -0.000001118580 -0.000004939462 0.000000864838 -0.000000735812 -0.000000021045 -0.000001198594 -0.000000244285</array>
               <array cmlx:templateRef="hess" dataType="xsd:double" dictRef="cc:hessianmatrix" size="61776">0.718718117 0.130509532 0.317095486 0.007095972 -0.194632939 0.527943173 -0.014662575 0.008235765 -0.021647771 0.194783820 -0.008068561 0.006853390 -0.004860044 -0.045739588 0.053192637 0.003626101 0.000390791 0.006221482 0.143773597 -0.065538087 -0.386713357 -0.104454538 0.047571179 -0.185864148 0.045778866 -0.070572233 -0.103548617 0.039677857 0.044133404 -0.061274171 -0.003650095 0.031097259 -0.117322082 -0.133128869 0.057598695 0.050177055 0.007495544 0.000025995 -0.000372420 -0.000166958 0.028063811 -0.002456638 0.024122582 -0.000315962 -0.000610713 -0.040148992 0.020970675 -0.033463843 0.000591881 -0.000328769 -0.165977282 0.037469313 -0.100454870 -0.002137760 -0.002401767 0.002213852 -0.097666448 0.049461326 -0.003502955 0.005282629 -0.041607117 0.057679200 -0.190032367 0.001618661 0.004336151 -0.001237279 0.001080076 -0.000176789 0.000056287 -0.000090246 -0.001309257 -0.001722639 -0.000287342 -0.000105323 0.000057756 -0.000412995 -0.000142649 0.000207773 0.000036156 0.000065157 0.000138103 -0.001547645 0.002148869 0.000036081 0.000085007 -0.002299669 0.003034282 0.004972698 0.000157187 -0.000480853 0.001909750 0.004827410 0.000256295 0.000113430 -0.000376940 0.000207659 0.000051470 0.000249393 -0.000018686 -0.000002528 0.000491871 -0.000125242 0.000286393 0.000002806 -0.000006290 0.000104668 0.000106308 0.000130719 -0.000009540 -0.000011225 0.000456704 0.000013145 0.000293854 0.000008042 -0.000016611 -0.000359960 0.000098610 -0.000296905 0.000012734 -0.000001504 0.000319652 -0.000271255 0.000089865 0.000009482 0.000010501 0.000016131 -0.000023786 0.000016533 -0.000002348 -0.000000629 0.000008971 -0.000001286 -0.000019808 0.000004070 0.000001325 0.000004791 0.000014244 -0.000011352 -0.000003349 0.000000931 0.001416324 -0.000486684 0.000846612 -0.000036503 0.000010489 0.000863699 0.001383495 0.000555617 -0.000002395 -0.000159981 -0.002851551 -0.000405537 -0.000204864 -0.000183834 -0.000074226 -0.053974806 -0.012857419 -0.003723171 -0.002125372 -0.000546795 -0.002810728 0.006767428 -0.000236808 -0.000365281 -0.000262014 -0.030544756 -0.008187518 0.008280350 -0.001365297 -0.000519016 0.001691657 -0.000544710 0.000589023 0.000347880 -0.000000029 0.009453265 0.002305772 -0.001029574 0.001110301 0.000431298 0.008096554 0.001975524 0.002127388 0.000601278 -0.000015266 -0.002157720 -0.000990870 0.000559974 -0.000288678 -0.000029612 -0.001521377 -0.000784594 0.000536226 -0.000208691 -0.000076670 -0.001058199 -0.000338837 -0.000202337 -0.000049609 -0.000002474 0.000354592 0.000268965 0.000076949 0.000035462 0.000080013 -0.001397496 -0.000690543 0.000651440 -0.000350158 -0.000079492 -0.000612302 0.000282480 -0.000891828 0.000061576 0.000042965 0.000033225 0.000002997 0.000062979 -0.000005469 -0.000007080 0.000034353 0.000004144 0.000012797 0.000003408 0.000001838 -0.000036749 -0.000036899 0.000046418 -0.000016673 -0.000003074 0.000000994 0.000000664 0.000001105 -0.000000566 -0.000000878 -0.000003810 0.000002595 -0.000013495 0.000003289 0.000000990 -0.000008270 0.000000903 -0.000008601 0.000000688 0.000000110 0.000029984 0.000022490 -0.000008682 0.000006747 -0.000002216 0.000007641 0.000004915 0.000005995 -0.000001013 -0.000002107 0.000041765 0.000022339 -0.000011512 0.000008391 -0.000002651 -0.000016025 0.000022355 -0.000081673 0.000012937 0.000002696 -0.000008522 -0.000004763 0.000002486 -0.000002394 0.000002569 -0.000013212 -0.000033856 0.000045104 -0.000014572 0.000002651 -0.000001182 0.000007079 -0.000025816 0.000004163 -0.000000554 -0.000034593 -0.000007955 0.000009399 -0.000007389 -0.000000540 -0.000067626 -0.000020525 -0.000046797 -0.000001708 0.000008877 -0.000029344 -0.000019531 0.000001082 -0.000005161 0.000003428 -0.000003543 -0.000000387 0.000000510 -0.000001512 -0.000000434 -0.000003896 0.000013679 -0.000031609 0.000006654 -0.000000266 -0.000001741 -0.000007985 0.000012996 -0.000003052 0.000001047 -0.000001471 -0.000004664 0.000007433 -0.000002389 -0.000000202 0.000005538 -0.000006244 0.000018221 -0.000003293 0.000000408 0.000186588 0.000020573 0.000217565 -0.000013598 -0.000019458 0.000134831 0.000025509 0.000047702 0.000006895 -0.000004927 0.000180036 0.000043400 0.000164339 -0.000002136 -0.000018172 -0.000006079 -0.000000567 0.000005676 -0.000002356 -0.000001412 0.000043400 0.000016597 -0.000011831 0.000010053 0.000001354 0.000029500 0.000006387 0.000011532 0.000001640 -0.000001898 -0.000006352 -0.000001172 -0.000003175 0.000000034 0.000000499 -0.000002668 0.000002022 -0.000010984 0.000002991 0.000000841 -0.000000005 0.000000158 0.000000597 -0.000000324 -0.000000272 -0.000006086 -0.000004422 0.000001241 -0.000001547 0.000000636 0.000001915 -0.000000040 -0.000000810 0.000000610 0.000000558 0.000001249 -0.000001846 0.000004741 -0.000001241 -0.000000350 -0.000058651 -0.000044910 -0.000010181 -0.000009625 0.000017841 -0.000019646 -0.000002357 0.000000650 -0.000003420 -0.000005182 0.000023242 0.000046029 -0.000048544 0.000018109 -0.000004555 0.000049156 0.000035287 0.000029216 0.000003288 -0.000019990 0.000001642 0.000003773 -0.000050240 0.000011246 0.000018733 -0.000057931 -0.000055145 0.000034788 -0.000021501 -0.000000899 -0.000001125 0.000000834 -0.000005444 0.000000985 0.000000458 -0.000001414 0.000000578 0.000002052 -0.000000638 -0.000002046 0.000001730 0.000001928 -0.000002929 0.000001172 0.000001363 -0.000000910 -0.000002585 0.000000455 -0.000000404 0.000000137 0.000001409 -0.000002282 0.000011679 -0.000002209 -0.000003085 0.000009019 -0.000005675 0.000029274 -0.000004254 -0.000003211 0.000005518 0.000003706 0.000001319 0.000001414 0.000000415 0.000000779 0.000000863 0.000000227 0.000000399 -0.000000470 0.000001646 0.000024262 -0.000037092 0.000009859 0.000003904 0.000007999 0.000018528 -0.000022049 0.000006898 0.000001718 -0.000000260 0.000004474 -0.000008464 0.000002173 0.000000665 0.000008190 0.000002272 -0.000000019 0.000001548 0.000000197 0.000006320 -0.000000741 0.000022863 -0.000002280 -0.000000574 -0.000009439 -0.000001020 0.000001520 -0.000002240 -0.000001307 -0.000006137 0.000020360 -0.000048987 0.000009973 0.000004168 -0.000015222 -0.000027468 0.000019094 -0.000009903 -0.000002572 -0.000004128 -0.000004724 0.000005460 -0.000002205 -0.000001372 0.000006616 -0.000030331 0.000050469 -0.000011830 -0.000005565 0.000001620 0.000012710 -0.000021427 0.000005111 0.000001798 0.000000461 0.000003953 -0.000006019 0.000001538 0.000000268 -0.000001693 0.000005252 -0.000008463 0.000002031 0.000000502 0.000001212 0.000005419 -0.000009292 0.000002547 0.000000557 0.000002224 0.000002044 -0.000001967 0.000000837 0.000000356 -0.000003028 -0.000000566 -0.000000843 -0.000000108 0.000000121 -0.000010534 -0.000020159 0.000035537 -0.000010374 -0.000003348 0.000014531 0.000002015 -0.000002724 0.000003545 0.000001989 -0.000004923 -0.000027980 0.000038574 -0.000011193 -0.000004258 -0.000000778 -0.000028782 0.000043138 -0.000011393 -0.000005144 0.000003734 -0.000001427 -0.000000627 0.000000425 0.000000790 -0.000005316 0.000020176 -0.000035947 0.000007941 0.000003680 -0.000003258 0.000002789 -0.000007466 0.000001341 0.000000720 0.000000626 0.000001507 -0.000002480 0.000000679 0.000000588 0.000001951 0.000001511 -0.000000508 0.000000403 0.000000095 -0.000001247 -0.000003811 0.000003117 -0.000001590 -0.000000438 0.000000943 -0.000000657 0.000000355 -0.000000181 0.000000544 0.000003340 0.000001195 0.000002723 0.000000199 -0.000000318 -0.000314236 -0.000104854 -0.000175277 -0.000021514 0.000030126 -0.000294786 -0.000115846 0.000020423 -0.000051754 0.000001060 0.000022192 0.000094251 -0.000332550 0.000066573 0.000016370 0.000293641 0.000115749 -0.000001220 0.000056318 -0.000017578 0.000410336 0.000208050 -0.000139305 0.000096404 0.000005059 -0.000279724 -0.000195886 0.000301595 -0.000094243 -0.000007150 -0.000029098 0.000016332 -0.000031918 0.000016467 -0.000000771 -0.000189296 -0.000013583 -0.000151658 0.000019570 0.000007474 -0.000026549 0.000037127 -0.000051667 0.000012984 -0.000000138 -0.000024420 -0.000013184 -0.000004249 -0.000001917 0.000002393 0.000014376 0.000028970 -0.000008526 0.000003775 -0.000017362 -0.000030641 -0.000012484 0.000020077 -0.000007999 -0.000008340 0.000150454 0.000011636 0.000106106 0.000004962 0.000006041 0.000040215 -0.000034331 0.000082256 -0.000008757 0.000013332 -0.000036421 -0.000058770 0.000037546 -0.000014825 0.000020467 -0.000173821 0.000045656 -0.000234577 0.000014242 -0.000012581 -0.000057690 0.000001380 -0.000025431 -0.000002591 -0.000018178 0.000031371 0.000059941 -0.000072454 0.000023422 -0.000001191 0.000337521 -0.000034534 0.000431307 -0.000019979 -0.000002919 -0.000102753 0.000081491 -0.000334015 0.000034015 0.000047953 -0.000288692 -0.000293811 0.000235203 -0.000111613 -0.000006642 -0.000138006 -0.000035230 -0.000070852 -0.000007774 0.000001707 0.000116446 0.000025747 0.000084255 0.000000717 -0.000008711 0.000009503 0.000064553 -0.000109309 0.000033724 0.000000691 0.000036264 0.000058745 -0.000240099 0.000048260 0.000017798 -0.000023968 -0.000083632 0.000208700 -0.000024954 -0.000023589 0.000197457 0.000156163 -0.000145255 0.000061679 0.000004917 -0.000034456 0.000035115 -0.000085410 0.000010851 0.000004207 0.000032427 -0.000026544 0.000105878 -0.000010875 -0.000011501 0.000055797 0.000052985 -0.000042438 0.000024748 -0.000002208 -0.000082693 -0.000029385 -0.000031609 -0.000008658 0.000006024 0.000011018 0.000012804 -0.000010712 0.000004623 -0.000004776 0.000084719 0.000058716 -0.000016609 0.000022691 -0.000009539 0.000005845 -0.000005765 0.000014961 -0.000003192 -0.000000750 -0.000017688 -0.000006203 -0.000009377 -0.000002263 0.000005150 -0.000041021 -0.000027479 0.000007520 -0.000012040 0.000004584 0.000184232 0.000083350 -0.000029177 0.000028261 0.000002032 -0.000146909 -0.000055018 0.000012998 -0.000016697 0.000000737 0.000019927 -0.000001359 0.000037777 -0.000004246 -0.000001535 0.000033983 0.000018982 -0.000003620 0.000005407 0.000000660 -0.000070130 -0.000039517 -0.000001825 -0.000011821 -0.000001972 0.000007004 -0.000013527 0.000026024 -0.000008333 0.000001698 -0.000041696 -0.000020188 -0.000005761 -0.000004457 -0.000000507 0.000023530 -0.000001687 0.000015626 -0.000000302 -0.000000664 0.000026151 0.000024933 -0.000026309 0.000006781 0.000002229 -0.000047322 -0.000081006 0.000057625 -0.000026771 -0.000008060 -0.000019376 -0.000039552 -0.000002877 -0.000008301 -0.000000256 0.000065332 0.000041678 -0.000037086 0.000020950 0.000004834 -0.000050542 -0.000118289 0.000100738 -0.000004841 -0.000005586 0.000031149 0.000036129 -0.000116472 0.000010427 0.000012443 -0.000267259 -0.000126343 0.000096595 -0.000069472 -0.000011241 0.000039307 0.000023096 0.000030153 0.000003877 -0.000002469 0.000080203 0.000035507 -0.000017097 0.000013287 -0.000000183 -0.000074996 -0.000045724 0.000052047 -0.000021248 -0.000002019 -0.000001809 -0.000020705 0.000020297 -0.000006659 -0.000001484 0.000001573 0.000006685 -0.000015858 0.000002666 0.000001813 0.000008934 0.000020275 -0.000026789 0.000007778 0.000002491 0.000004842 -0.000007216 0.000011204 -0.000002454 -0.000000857 -0.000007774 0.000019150 -0.000031718 0.000006033 0.000001075 -0.000012013 -0.000015511 0.000005963 -0.000005934 -0.000000923 -0.000005255 0.000007853 -0.000017155 0.000003172 0.000000945 0.000009106 -0.000006415 0.000021331 -0.000002492 -0.000001282 0.000008351 -0.000003081 0.000022346 -0.000002121 -0.000001042 0.000002769 0.000000822 0.000000112 0.000000713 -0.000000073 0.000004282 0.000000306 0.000000893 0.000000217 0.000000615 0.000001353 0.000002331 -0.000003214 0.000001106 -0.000000768 -0.000004663 -0.000001345 -0.000001365 -0.000000707 0.000000056 -0.000003005 0.000001361 -0.000004663 0.000000673 0.000000309 0.000003382 0.000002158 -0.000000388 0.000000683 -0.000000412 0.000007113 -0.000000204 0.000005150 -0.000000253 0.000000163 0.000002461 0.000001196 0.000001584 0.000000382 -0.000001321 0.000002105 0.000002078 -0.000002539 0.000000884 0.000000129 -0.101632876 -0.032851331 0.039761742 0.000779242 0.000778102 -0.032722559 -0.122464257 0.063258144 0.001797870 -0.003485705 0.035619141 0.065623840 -0.189696408 -0.000666176 -0.002898648 -0.000630984 -0.016287365 0.004206553 -0.000058227 -0.000337633 -0.009137872 -0.014053866 0.004655553 -0.000273260 -0.000247231 0.009694789 0.026070749 0.006003783 0.000028908 0.000502087 0.005513597 -0.002967581 0.000531013 0.000017406 -0.000088194 -0.003152371 -0.003355475 -0.003176712 0.000027364 -0.000224416 0.002204456 -0.001433993 0.001335223 -0.000130023 -0.000015043 -0.000634304 0.000090047 -0.000263193 0.000078723 0.000062018 -0.001000773 -0.000762242 -0.000702639 0.000233243 0.000080828 0.000123669 -0.001302033 0.000191277 -0.000058830 -0.000115151 0.006686391 -0.000542480 0.000851917 -0.000052438 -0.000136572 -0.001862420 -0.000219163 -0.003082264 -0.000089052 -0.000192126 0.001150069 -0.004120090 -0.001572220 0.000321621 -0.000124819 0.004271766 0.004785109 0.012610203 -0.000038321 0.000383288 -0.001846542 0.011702273 0.015366127 -0.000318761 0.000681336 0.008424098 -0.006005881 -0.028408277 0.000229122 -0.000338263 -0.002754111 0.001319830 -0.001444454 -0.000039116 -0.000045990 0.001938963 0.000291354 -0.000631903 0.000019366 -0.000028182 -0.000496684 0.000669994 0.000481412 -0.000073127 0.000003581 -0.000491595 -0.000354114 -0.000520044 -0.000007020 -0.000011789 0.000086682 -0.000219343 -0.000079240 -0.000001446 -0.000011326 -0.000016670 0.000816609 0.000333779 -0.000003090 0.000031733 -0.000844826 -0.000154636 0.000551260 -0.000197958 -0.000110809 0.000597646 -0.000825417 0.000379991 -0.000113008 -0.000069075 -0.000902392 0.000603973 -0.000966939 0.000210641 0.000141391 -0.000142445 0.000518645 0.000352500 -0.000031695 0.000042709 0.000260875 0.000364449 0.000475900 -0.000011539 0.000020224 -0.000254697 -0.000470417 -0.000391427 0.000014135 -0.000018922 -0.003146840 0.001113827 -0.000504616 -0.000194364 0.000119237 0.001184002 -0.000058809 0.001328461 0.000168465 -0.000092787 -0.001864918 -0.000860875 0.001069239 0.000087046 -0.000110486 0.000077752 0.000004857 0.000066086 -0.000011240 -0.000001655 0.000045074 -0.000006693 0.000062386 -0.000011979 -0.000002008 -0.000000341 -0.000004077 0.000019720 -0.000003546 -0.000001312 0.000016703 0.000002701 0.000000311 0.000002626 0.000000614 -0.000003585 0.000014277 -0.000027878 0.000009716 0.000000284 -0.000011691 -0.000005448 -0.000021531 0.000003705 0.000000777 0.000042505 -0.000005175 0.000070630 -0.000016228 -0.000004093 0.000034560 -0.000006978 0.000064506 -0.000016930 -0.000002242 0.000018769 0.000000453 0.000013052 -0.000003239 0.000000706 -0.000011351 0.000002144 -0.000031826 0.000007709 0.000003510 0.000018715 0.000010443 -0.000016853 0.000006264 0.000001212 -0.000000215 -0.000000076 0.000004128 -0.000000815 -0.000000333 0.000012578 0.000010304 0.000019351 -0.000004563 -0.000004621 0.000046460 -0.000009479 0.000042013 -0.000010297 -0.000002423 -0.000002068 0.000000090 0.000020981 -0.000005097 -0.000001291 -0.000014260 0.000003283 -0.000018403 0.000004570 0.000000653 -0.000014140 -0.000003230 -0.000006972 0.000000336 0.000000003 0.000026403 0.000009126 0.000019847 -0.000001583 -0.000000813 0.000010017 0.000001111 0.000007822 -0.000000732 -0.000000436 0.000000576 0.000000598 0.000000167 -0.000000117 0.000000400 0.000010176 0.000000970 0.000007782 -0.000000831 -0.000000401 -0.000036368 0.000042460 -0.000151948 0.000039870 0.000004838 -0.000022097 0.000034991 -0.000147943 0.000041018 0.000008790 0.000041631 0.000003786 0.000011222 0.000002651 0.000000934 0.000003489 0.000003037 -0.000001402 0.000000598 -0.000000909 0.000000808 0.000001178 -0.000001086 0.000000154 0.000000106 0.000011995 0.000001012 0.000007660 -0.000000428 -0.000001006 -0.000002079 -0.000004001 -0.000002602 -0.000000086 -0.000000316 -0.000013833 0.000001456 -0.000018615 0.000004339 0.000001410 0.000025912 0.000007561 -0.000019144 0.000006340 0.000001448 0.000075381 0.000187119 -0.000324066 0.000081624 0.000042229 0.000116842 0.000302012 0.000075951 0.000007633 -0.000011085 0.000221740 -0.000155456 0.000511475 -0.000091323 -0.000070093 0.000083735 0.000205452 -0.000297690 0.000099061 0.000036618 -0.000084915 0.000463514 -0.000100178 0.000100038 0.000032472 0.000034338 -0.000007192 0.000349090 -0.000052282 -0.000017374 0.000002037 -0.000013013 0.000036545 -0.000010428 -0.000000319 0.000009771 -0.000018160 0.000077029 -0.000021228 -0.000005959 -0.000020627 -0.000004774 0.000005678 -0.000004735 -0.000001021 0.000022233 -0.000024923 0.000086046 -0.000022268 -0.000001902 0.000011539 -0.000012200 0.000052157 -0.000013521 -0.000003153 -0.000036343 0.000005642 -0.000042012 0.000006986 0.000001222 -0.027850134 -0.020050281 0.023437833 0.008729765 0.010844302 -0.041973031 -0.000976684 -0.000822632 -0.002850285 0.000338678 0.057297695 0.006489902 0.016234502 0.006979394 0.009956065 -0.049628392 0.001794652 -0.019293126 -0.000029625 -0.001864849 -0.007080420 -0.001941289 -0.005415383 -0.001494736 0.002224115 0.000699490 -0.003607260 0.001306626 0.001209527 0.003658888 0.024326705 0.000188500 0.006795438 0.000795164 0.001606940 0.010068317 0.002605507 0.008369610 -0.000318229 -0.001967412 -0.012642152 0.004510605 -0.007541684 0.001861566 -0.001499942 0.004388781 -0.000413259 0.002220228 -0.000011123 -0.000083721 -0.010239118 0.000020860 -0.003886209 0.000266468 -0.000052065 0.021619084 -0.000391965 0.007879338 -0.000444398 -0.000013122 0.000123174 -0.000120545 0.000229691 -0.000243596 -0.000701122 0.000145773 0.000000191 0.000023344 0.000073709 0.000065003 -0.000440966 -0.000124374 -0.000038613 -0.000320877 0.000058971 0.000023483 -0.000023751 0.000219761 0.000025338 -0.000025995 -0.000125617 -0.000516329 -0.000091831 -0.000007970 0.000134904 0.000347697 -0.000043921 -0.000332483 -0.000053535 0.000073114 0.013508822 -0.001160740 0.006534520 0.000202902 0.000752758 0.010517819 -0.001315979 0.004359868 -0.000245052 -0.000114570 -0.012742556 0.000650940 -0.005640088 0.000460694 0.000264865 -0.020854135 0.000827498 -0.008457754 0.000377060 -0.000046350 0.001079739 0.000094957 0.000679539 0.000007533 -0.000068182 -0.007939296 0.000491070 -0.003431466 0.000169347 -0.000133187 0.000299062 0.000011004 0.000132722 -0.000042414 -0.000102726 -0.000176982 -0.000087328 -0.000176517 -0.000082405 0.000052660 -0.000060639 -0.000117003 -0.000046835 0.000084961 0.000262304 -0.000272529 0.000015831 -0.000153103 -0.000011733 -0.000039104 -0.000318541 0.000102794 -0.000095952 0.000000043 0.000040752 -0.000195449 0.000036857 -0.000038276 -0.000028112 0.000002748 0.000939344 -0.000408411 -0.000465478 -0.000031282 0.000038626 0.000373016 0.000042012 0.000112365 -0.000041117 0.000025791 0.000703362 -0.000328371 -0.000729278 -0.000063305 0.000063382 -0.000342646 0.000307623 -0.000205310 -0.000004680 -0.000006285 -0.000321946 0.000295284 0.000251172 0.000015749 -0.000019261 -0.000179497 -0.000195819 0.000062795 -0.000001303 0.000012262 0.000107050 -0.000078046 -0.000004717 -0.000001343 0.000004139 0.000405385 -0.000095905 0.000206290 0.000009457 -0.000013435 -0.000162879 0.000089173 0.000002610 0.000009893 -0.000004625 -0.000032843 -0.000048033 -0.000035417 -0.000000386 0.000006985 -0.000101024 0.000004864 -0.000049341 -0.000003782 0.000008288 -0.000060401 -0.000070507 0.000002798 0.000005518 -0.000006966 -0.000106597 -0.000076661 -0.000005234 -0.000002071 0.000006069 -0.000095849 -0.000046104 0.000045660 -0.000016358 0.000024293 -0.000074590 0.000016542 -0.000139194 -0.000007264 0.000011950 -0.000025835 0.000005686 -0.000005151 0.000003644 -0.000001167 -0.000010167 0.000011963 -0.000005845 0.000004663 -0.000006008 0.000029975 -0.000003270 -0.000003723 -0.000001947 0.000003584 0.000126064 -0.000063784 -0.000059662 -0.000001077 0.000003633 0.000107540 -0.000048097 0.000056123 -0.000000460 -0.000001549 0.000023915 -0.000042875 -0.000058084 0.000001091 0.000001958 -0.000067703 0.000010432 -0.000030834 -0.000004199 0.000002018 0.000027372 0.000040101 -0.000012622 0.000005535 -0.000004479 -0.000080653 0.000033721 -0.000044404 -0.000000606 0.000001535 0.000018854 -0.000001795 -0.000000188 -0.000002496 -0.000000996 -0.000032025 0.000021133 0.000017514 0.000002835 -0.000002250 0.000003340 -0.000012478 0.000013769 -0.000003057 0.000000992 -0.000007807 -0.000003164 0.000000608 -0.000000226 0.000000038 -0.000009309 0.000004361 -0.000013859 0.000003953 -0.000000416 -0.000003312 -0.000001251 -0.000000281 -0.000001843 0.000001510 0.000002783 -0.000002086 0.000009178 -0.000001822 -0.000000719 -0.000001890 -0.000009943 0.000017028 -0.000004353 -0.000000192 0.000019915 0.000012159 -0.000011552 0.000004954 0.000000442 0.000003853 0.000002661 -0.000002723 0.000001136 0.000000060 -0.000002239 0.000003869 -0.000010541 0.000002381 0.000000657 -0.000000792 -0.000000300 0.000001491 -0.000000596 -0.000000229 -0.000008948 -0.000006833 0.000006197 -0.000002701 -0.000000411 -0.000004266 -0.000001342 -0.000001353 -0.000000278 0.000000375 0.000003459 0.000001094 -0.000000216 0.000000721 -0.000000097 -0.000003431 0.000005874 -0.000015653 0.000003364 0.000000975 0.000005454 0.000000600 0.000003614 -0.000000278 -0.000000276 -0.000003140 -0.000000158 -0.000002153 -0.000000069 0.000000393 -0.000006631 -0.000004865 0.000003969 -0.000001177 -0.000000833 -0.000030866 -0.000019896 0.000013450 -0.000006955 -0.000000849 0.000037995 0.000019519 -0.000015101 0.000006464 0.000000506 0.000011362 0.000004715 -0.000001632 0.000001756 0.000000798 0.000008401 -0.000004683 0.000019602 -0.000004183 -0.000001223 0.000012773 0.000007955 -0.000003377 0.000002395 0.000001098 0.000082636 0.000041647 -0.000019789 0.000013217 0.000001271 0.000034063 0.000018983 -0.000009597 0.000006709 0.000001697 -0.000081791 -0.000044867 0.000032943 -0.000014746 -0.000001489 0.000004219 0.000004000 -0.000005488 0.000001235 -0.000000750 -0.000009442 0.000001300 -0.000013425 0.000002332 0.000000639 0.000006082 0.000002196 0.000003222 -0.000000390 -0.000000015 0.194874978 -0.133222483 0.761249576 0.057429100 0.092067203 0.283943799 -0.189600685 0.072439527 -0.221674130 0.563394755 0.000954603 -0.030040555 -0.018807604 0.022960845 0.640830371 -0.000272803 -0.019791423 -0.014760831 0.013218130 0.065037320 -0.000142842 0.025167126 0.015045990 -0.019454611 0.025583985 0.000428456 -0.047892940 -0.006143013 -0.009896300 -0.129624409 0.003301871 0.023025712 0.025078053 -0.022238623 -0.020851842 0.002853207 -0.054631491 -0.029985254 0.039867231 0.000247378 -0.000080363 0.000576971 0.000119787 -0.000162525 -0.022427454 0.000116122 0.000365839 -0.000013625 0.000640769 -0.001650172 0.000038532 0.000125646 0.000223110 -0.000520550 -0.016085387 -0.000029350 0.000115881 -0.000064055 -0.000060739 -0.162134241 -0.000315186 -0.000999186 -0.000913544 -0.000295333 0.026904329 -0.000202029 0.000489659 -0.000191231 -0.000749664 -0.062606463 -0.000002116 -0.000257081 -0.000062847 0.000006238 -0.000229527 0.000010295 -0.000357150 -0.000221574 0.000312171 -0.000974729 -0.000003484 -0.000132846 -0.000042383 -0.000003179 0.000475487 0.000008987 -0.000318227 -0.000195225 0.000176802 0.001121608 -0.000018040 0.000308650 0.000131470 -0.000206741 -0.003144041 0.000000753 -0.000113690 -0.000116779 0.000292683 -0.004019690 -0.000001429 -0.000020132 0.000000427 0.000003823 -0.000213056 0.000001314 0.000012001 -0.000002542 0.000016826 0.000042321 -0.000000372 0.000002767 -0.000003016 -0.000016970 0.000387561 0.000011484 -0.000805764 -0.000327716 0.000237154 -0.001636813 -0.000131235 -0.000703801 0.000078318 -0.000542107 0.008032494 0.000010713 0.000668625 0.000395544 -0.000281580 -0.001757224 0.000228257 0.002219193 0.003020401 -0.007042500 -0.032893386 -0.000184307 -0.000934248 0.003627998 0.001885060 -0.036313900 0.000212048 0.000084021 0.005595092 -0.004718026 0.030186899 0.000046329 -0.001193842 0.000029832 0.000917413 0.002882808 0.000128682 0.001160553 -0.001473375 0.002817901 0.003393483 -0.000039532 -0.002364899 -0.001091320 0.001350272 0.014112175 0.000015755 -0.000087097 0.000393816 -0.000591048 -0.001343426 -0.000007351 -0.000412332 0.000271248 -0.000471738 -0.000521169 0.000004601 0.000309948 0.000168923 -0.000089568 -0.001844519 0.000041049 0.000694106 -0.000093207 0.000002768 -0.000038515 -0.000047951 -0.000351601 0.000213214 -0.000536469 -0.002549815 -0.000005625 0.000564224 0.000006291 0.000192762 -0.001238364 0.000001880 -0.000041571 0.000002180 -0.000014552 0.000042138 0.000003461 -0.000010013 -0.000009018 0.000002461 0.000042343 0.000001499 -0.000017767 0.000007072 -0.000036936 -0.000043347 -0.000000961 -0.000003489 0.000000902 -0.000000837 0.000003337 0.000001214 0.000010990 0.000000205 0.000005964 -0.000010880 -0.000000869 0.000006404 0.000001355 0.000002437 -0.000009486 -0.000001575 0.000000323 -0.000001689 0.000015632 0.000025481 -0.000002225 -0.000008319 0.000000182 0.000000697 0.000013254 -0.000001009 -0.000005655 -0.000002795 0.000019507 0.000043387 -0.000005101 0.000048621 0.000002740 0.000034402 -0.000032896 0.000001364 0.000003036 -0.000003806 -0.000007340 -0.000006985 0.000004120 -0.000017820 -0.000004574 -0.000033583 -0.000016481 -0.000003057 0.000002208 0.000002223 0.000010562 0.000013077 -0.000002476 0.000001379 0.000003591 -0.000013704 -0.000029775 0.000001331 0.000049975 0.000000973 -0.000003847 -0.000097451 0.000002308 0.000008900 0.000000214 -0.000012377 -0.000036347 -0.000001800 -0.000001872 0.000001023 -0.000001772 -0.000000018 -0.000002183 0.000018859 0.000002194 0.000016477 -0.000010496 0.000002226 -0.000002051 -0.000001769 -0.000008221 -0.000006661 -0.000000140 -0.000005093 0.000000408 -0.000004458 0.000000798 0.000001559 -0.000011968 -0.000001926 -0.000008950 0.000008695 0.000008270 -0.000168629 -0.000016069 -0.000037033 0.000248415 0.000004450 -0.000055805 -0.000014880 0.000014662 0.000140521 0.000004024 -0.000140375 -0.000013230 -0.000012055 0.000240775 -0.000001240 -0.000005831 0.000002747 -0.000003822 -0.000003117 0.000002588 -0.000002556 -0.000006882 0.000016818 0.000044949 -0.000000234 -0.000014903 -0.000002445 0.000004785 0.000044723 0.000000099 0.000004366 0.000000439 0.000000196 -0.000008294 0.000001222 0.000009487 -0.000000013 0.000005413 -0.000008245 -0.000000537 -0.000001500 0.000000327 -0.000000110 0.000001563 0.000000245 0.000001266 -0.000000007 -0.000003080 -0.000007285 0.000000908 0.000001362 -0.000001019 0.000000370 -0.000000866 0.000000041 -0.000003395 -0.000000235 -0.000002575 0.000001514 0.000007896 0.000025232 -0.000013003 -0.000025739 -0.000069664 -0.000003626 0.000000237 0.000010408 -0.000003870 -0.000021688 -0.000005426 0.000019351 0.000005813 0.000040990 0.000030300 -0.000008604 -0.000030248 0.000015812 0.000012911 0.000057743 0.000008070 0.000035505 -0.000021512 0.000017841 -0.000007509 0.000000569 -0.000011179 0.000007641 -0.000045165 -0.000065813 -0.000000002 0.000003034 0.000000022 0.000002127 -0.000001523 -0.000001050 -0.000001271 0.000002764 -0.000000673 -0.000002008 0.000000463 0.000001592 -0.000001594 0.000002260 0.000003344 0.000000311 0.000000178 -0.000000030 -0.000001731 -0.000000608 -0.000000718 -0.000008472 0.000003269 -0.000004635 0.000002466 0.000000949 -0.000017500 0.000000458 -0.000011805 0.000008840 0.000000493 -0.000001323 -0.000001280 0.000002283 0.000007952 -0.000000088 0.000000358 0.000000508 0.000000571 0.000001739 -0.000001878 0.000021464 -0.000002497 0.000027343 0.000009855 -0.000001435 0.000011720 -0.000002385 0.000017734 0.000011201 -0.000000561 0.000004999 -0.000000033 0.000005096 0.000002569 0.000000901 -0.000001008 -0.000001405 0.000001870 0.000007585 0.000001242 -0.000011966 -0.000000785 -0.000006381 0.000011826 -0.000000579 0.000001200 0.000003740 -0.000004267 -0.000016570 -0.000002918 0.000027157 -0.000001317 0.000027703 -0.000000264 0.000000800 -0.000010457 0.000003957 -0.000023567 -0.000024434 -0.000000141 -0.000001760 0.000002086 -0.000004861 -0.000007572 0.000003468 -0.000029599 0.000002854 -0.000035181 -0.000008472 -0.000001029 0.000012397 -0.000001644 0.000014173 0.000002197 -0.000000413 0.000003456 -0.000000348 0.000004569 0.000000080 -0.000000960 0.000004963 0.000000184 0.000004845 -0.000000676 -0.000000392 0.000004768 -0.000000328 0.000006296 0.000000956 0.000000121 0.000001004 -0.000000813 0.000001647 0.000001891 -0.000000265 0.000000571 0.000000668 -0.000000185 -0.000001857 0.000001640 -0.000016576 0.000004374 -0.000025920 -0.000019022 0.000000853 -0.000000714 -0.000005013 0.000006978 0.000024441 0.000002090 -0.000022179 0.000002909 -0.000030615 -0.000016445 0.000002578 -0.000025229 0.000003572 -0.000032211 -0.000012886 0.000000540 -0.000001970 -0.000001637 -0.000000351 0.000003728 -0.000002146 0.000021491 -0.000001833 0.000025188 0.000004381 -0.000000610 0.000004200 0.000000292 0.000004282 -0.000001482 0.000000080 0.000001326 -0.000000603 0.000001381 0.000001029 0.000000026 0.000000302 -0.000000519 0.000001214 0.000002184 0.000000239 -0.000001652 0.000000207 -0.000002678 -0.000002833 0.000000331 -0.000000603 -0.000000823 -0.000000523 0.000000449 0.000000178 -0.000001274 -0.000000402 -0.000000629 0.000003125 -0.000005032 0.000233223 0.000022554 -0.000034491 -0.000463169 -0.000010418 0.000090052 0.000043124 -0.000091572 -0.000371545 -0.000010115 0.000128640 -0.000012006 0.000149210 0.000057552 -0.000000959 -0.000141401 -0.000018900 0.000105842 0.000448246 0.000010084 -0.000067435 -0.000059813 0.000182511 0.000511047 0.000006347 -0.000026497 0.000049002 -0.000201642 -0.000409012 0.000005900 0.000046355 -0.000003785 0.000032148 -0.000455242 0.000011486 0.000186079 0.000028155 0.000051031 0.000234120 0.000001206 0.000060173 0.000018671 -0.000005417 -0.000175686 0.000001727 0.000007833 0.000001970 -0.000005471 -0.000024213 -0.000010298 0.000003726 0.000020464 0.000015011 0.000004261 -0.000004427 -0.000008332 0.000013675 -0.000013113 -0.000025399 0.000018488 -0.000078834 -0.000044219 -0.000009320 0.000170369 0.000015106 -0.000059072 -0.000029466 -0.000031629 0.000072941 0.000011943 -0.000024416 -0.000020422 -0.000039478 -0.000008810 -0.000030425 0.000161449 0.000065877 0.000062370 -0.000256395 -0.000015032 0.000034540 0.000037457 0.000004530 -0.000055815 -0.000003418 0.000048385 0.000000526 0.000050561 -0.000000966 0.000034952 -0.000303069 -0.000093856 -0.000095892 0.000539128 0.000001923 0.000146518 -0.000033365 0.000095049 -0.000263745 -0.000000601 -0.000162318 0.000034092 -0.000215342 -0.000175678 -0.000005571 0.000053151 0.000023611 -0.000008986 -0.000137861 0.000000204 -0.000061860 -0.000010923 -0.000007623 0.000148360 0.000000602 0.000094399 0.000003885 0.000068516 -0.000062232 -0.000015030 0.000144544 0.000015451 0.000121635 -0.000001287 0.000004622 -0.000063751 0.000047859 -0.000087869 0.000067781 -0.000002192 0.000043667 -0.000039450 0.000125672 0.000356314 -0.000005099 0.000053885 0.000005428 0.000027950 -0.000062124 0.000002385 -0.000060017 0.000000340 -0.000032950 0.000071060 0.000000400 0.000027263 -0.000004423 0.000043305 0.000034796 -0.000003355 0.000024418 0.000011078 -0.000013070 -0.000080186 -0.000001773 0.000007784 0.000004905 0.000009387 0.000001625 -0.000000343 0.000006796 -0.000002107 0.000042851 0.000072401 0.000001139 -0.000009347 -0.000001875 -0.000007399 0.000004358 0.000000310 0.000004813 -0.000003068 -0.000002453 -0.000015758 -0.000000633 -0.000002189 0.000000254 -0.000021036 -0.000036541 0.000001327 0.000010077 -0.000020239 0.000059619 0.000125562 0.000001000 0.000011689 0.000018967 -0.000032909 -0.000155093 -0.000000004 -0.000030123 -0.000001095 -0.000011675 0.000047463 -0.000000099 -0.000005685 -0.000005035 0.000009430 0.000037141 -0.000001518 0.000008896 0.000010134 -0.000023217 -0.000054108 0.000000236 -0.000036202 -0.000008436 -0.000019194 0.000043681 -0.000000576 0.000010879 0.000007449 -0.000007008 -0.000041067 0.000001068 -0.000008536 -0.000002498 -0.000001047 0.000025534 -0.000001501 0.000011489 -0.000003740 0.000016292 0.000009954 0.000003346 -0.000021454 0.000032509 -0.000070554 -0.000150263 0.000000777 -0.000006591 0.000002580 -0.000010964 -0.000031666 -0.000001063 0.000012791 -0.000012335 0.000041793 0.000106315 0.000005486 -0.000034218 0.000021335 -0.000027982 -0.000083200 -0.000006644 0.000009741 -0.000041746 0.000055191 -0.000046036 0.000002592 -0.000019654 0.000032302 -0.000156517 -0.000508126 0.000000907 -0.000016596 0.000002804 -0.000003524 0.000090690 0.000000827 0.000010095 -0.000006820 0.000026263 0.000101593 0.000001385 -0.000018766 0.000011708 -0.000042293 -0.000084080 0.000001512 -0.000010457 0.000001734 -0.000012631 -0.000004597 -0.000000318 0.000010450 -0.000000924 0.000009102 -0.000004259 -0.000000252 0.000015400 -0.000003028 0.000016653 0.000001236 0.000000361 -0.000008707 -0.000001106 -0.000005587 0.000004047 -0.000002604 0.000025410 0.000004903 0.000013663 -0.000010941 -0.000000702 0.000004122 0.000006086 -0.000006272 -0.000016098 -0.000000979 0.000013760 0.000002907 0.000006932 -0.000006623 0.000001147 -0.000011841 -0.000000469 -0.000007207 0.000017354 0.000000274 -0.000013512 -0.000001287 -0.000005832 0.000022439 0.000000315 -0.000000749 -0.000000203 0.000000829 0.000003011 0.000000552 -0.000001996 -0.000001721 0.000000671 0.000005018 -0.000000309 0.000001988 0.000001203 0.000002463 0.000000060 -0.000000449 0.000001505 0.000000847 -0.000000642 -0.000004862 -0.000000462 0.000003266 0.000000662 0.000001884 -0.000002664 -0.000000046 0.000000210 -0.000000111 0.000001532 0.000002714 0.000000861 -0.000004766 -0.000002172 -0.000000887 0.000007095 -0.000000240 -0.000000320 0.000001275 0.000000300 0.000001757 -0.000000065 0.000000793 -0.000000226 0.000002244 0.000002171 0.001038486 -0.007722252 -0.019311430 0.027063816 -0.003414367 -0.002233577 -0.006577467 -0.003800342 0.008438814 0.000726771 -0.000879577 0.008542742 0.006650796 0.000235194 -0.002264484 -0.000264509 0.001252391 0.000590583 0.000961247 -0.000167398 -0.000214719 0.002748835 0.000207336 0.000250447 -0.000083365 0.000497104 -0.001200357 0.001600984 -0.002641244 -0.000193700 -0.000079281 0.000174170 0.000756757 -0.001039841 0.000249700 -0.000117366 -0.000079933 -0.000659541 0.000909657 -0.000037071 -0.000067702 0.000427246 0.000129882 0.000451024 0.000044772 -0.000004962 0.000369904 0.000145409 0.000571928 0.000159000 -0.000023719 0.000290675 0.000406470 0.000461745 0.000279731 0.000004218 -0.000655466 0.000138278 -0.001051052 -0.000204528 -0.000134676 0.000034848 -0.000121396 -0.000973442 0.000194927 0.000044015 -0.000259245 -0.000438544 0.000314402 -0.000495858 -0.000140800 -0.000071988 0.000711841 -0.000107950 0.000130337 0.000056217 -0.000142035 -0.000819567 0.000292048 0.000360178 0.000152151 0.000243906 -0.000627902 0.001245487 0.000479860 -0.000017914 -0.003223028 -0.002386484 -0.000646186 -0.000243227 -0.000008349 -0.000388703 -0.000269880 0.000446769 -0.000244719 -0.000030456 -0.000321352 0.000153767 0.000106467 0.000035074 0.000032446 -0.000125634 -0.000138666 0.000143915 -0.000086336 -0.000021625 0.000080458 -0.000100027 0.000077508 0.000022183 -0.000002298 0.000017826 -0.000026737 0.000041960 0.000018907 0.000022317 -0.000024041 0.000039808 -0.000139360 -0.000042239 0.000052476 -0.000567054 -0.000050981 -0.000608715 -0.000337260 0.000029488 -0.000365066 0.000052578 -0.000616380 -0.000131287 -0.000039129 0.000603590 -0.000022777 0.001006827 0.000249551 0.000038894 0.000079374 0.000029722 0.000036133 0.000029147 -0.000007088 0.000000222 -0.000083622 -0.000010495 0.000029684 0.000003566 -0.000026624 0.000085994 -0.000027845 -0.000042223 0.000037552 0.000158040 -0.000056434 0.000471288 -0.000182852 -0.000085818 -0.000003891 0.000342372 -0.000368985 -0.000055903 -0.000015158 0.000239796 0.000176362 0.000245950 -0.000159704 -0.000005421 -0.000076556 -0.000012654 -0.000026469 0.000115440 -0.000004194 -0.000066758 -0.000008676 -0.000028166 -0.000002520 -0.000002166 -0.000016969 0.000000491 -0.000010126 -0.000027824 0.000000954 0.000000889 -0.000005569 0.000009214 -0.000026372 0.000002775 0.000026173 0.000000721 0.000017512 -0.000004809 0.000001378 0.000018640 0.000002419 0.000013700 0.000004330 -0.000007880 -0.000075246 -0.000001844 -0.000037611 0.000054700 -0.000007137 -0.000065869 -0.000002716 -0.000037872 0.000083318 -0.000001094 -0.000014965 -0.000004667 -0.000005954 0.000033216 0.000004659 0.000035736 -0.000002569 0.000019197 0.000012591 0.000002215 0.000009834 -0.000004374 0.000011373 0.000030508 -0.000000323 -0.000003906 0.000000592 -0.000001844 -0.000013501 -0.000005411 -0.000032596 0.000007600 -0.000023449 0.000094107 -0.000005560 -0.000053427 -0.000002279 -0.000017413 0.000010477 -0.000002523 -0.000014644 0.000000654 -0.000012389 0.000072167 0.000001761 0.000024786 0.000000854 0.000008987 -0.000026959 -0.000000017 0.000006387 0.000001667 0.000002941 0.000002166 -0.000000627 -0.000021501 -0.000003046 -0.000008567 0.000057949 -0.000000052 -0.000008053 -0.000001273 -0.000002840 0.000008278 -0.000000228 -0.000001413 -0.000000640 -0.000000579 -0.000007997 0.000000264 -0.000006937 -0.000001775 -0.000002178 0.000008393 0.000011186 0.000136581 0.000001602 0.000085037 -0.000109201 0.000017225 0.000139050 -0.000005985 0.000086414 -0.000113357 0.000006107 -0.000005429 -0.000009967 0.000006172 0.000030217 -0.000000812 -0.000003847 0.000001322 -0.000000207 0.000005258 -0.000000334 -0.000000751 0.000000461 -0.000001170 0.000003025 0.000000140 -0.000007842 -0.000001154 -0.000000744 0.000010339 0.000000372 -0.000000623 0.000000829 0.000001193 0.000002727 0.000002779 0.000023716 -0.000000548 0.000009646 -0.000022144 0.000001624 0.000007848 -0.000005382 0.000016268 -0.000015100 -0.000018723 0.000218701 -0.000030473 0.000259780 0.000123256 -0.000007353 -0.000021777 -0.000037649 -0.000032219 -0.000007239 0.000017392 -0.000331009 0.000032836 -0.000428651 -0.000117548 -0.000024709 0.000229260 -0.000010129 0.000282741 0.000131619 -0.000031872 0.000278230 0.000043384 0.000359377 0.000125004 0.000017141 -0.000127581 0.000032052 -0.000172585 -0.000050382 -0.000002876 -0.000031301 -0.000000259 -0.000022035 0.000023971 -0.000009952 -0.000075334 0.000005736 -0.000045119 0.000061841 -0.000005068 -0.000010012 0.000006295 -0.000011801 -0.000003749 -0.000005242 -0.000075188 -0.000002428 -0.000046798 0.000060401 -0.000005116 -0.000047635 0.000001066 -0.000028260 0.000041738 -0.000000987 0.000034565 0.000006874 0.000014525 -0.000041821 -0.018382259 -0.116943968 -0.031482191 0.042200579 -0.022984778 0.005231247 -0.015121026 -0.128054234 0.101154706 0.017320231 -0.011857008 0.016328870 0.096243142 -0.239482493 -0.035290331 0.002925135 0.047577226 0.024820768 -0.028396703 -0.269082759 0.003790917 0.014408403 0.003391658 0.012048124 -0.035052243 -0.001475796 -0.014528629 0.014572861 -0.022661872 0.019091724 -0.001390386 -0.029400167 -0.021023407 0.025060404 -0.011867668 -0.001904533 -0.029522672 -0.008591361 0.014083569 -0.005982533 0.000135231 0.042559252 0.017118945 -0.012239191 0.005144005 0.000255496 -0.008638074 -0.003394174 0.001757677 -0.005268758 -0.000083037 0.006728095 0.010892119 -0.006104070 0.007511297 0.000180495 -0.017530401 -0.011367459 0.018472953 -0.016055530 0.001137258 0.001042220 0.001537773 -0.001492392 -0.000390972 0.000268872 -0.000291467 -0.002097051 -0.002038008 -0.000242758 -0.000010897 0.001821565 -0.001318129 -0.000002232 0.000352758 0.000008555 -0.000399945 0.000002788 -0.000185319 -0.000037233 0.000088466 -0.000537956 0.000294602 -0.000240940 0.000281903 0.000020711 0.000967873 -0.000021109 0.000516443 -0.000095423 -0.001220010 -0.013063527 -0.006195554 0.004853253 -0.028231022 0.000112587 -0.006015795 -0.000840176 0.008295110 -0.020805389 -0.000485513 0.004278984 0.007822434 -0.007165191 0.024276392 -0.000029839 0.013993031 0.011271792 -0.013943363 0.023133594 -0.000084543 -0.001090887 -0.001274103 0.000491616 -0.000662813 0.000011721 0.006126973 0.004362579 -0.005616118 0.005655959 0.000137246 0.000337590 -0.000303680 0.000494239 -0.000320945 0.000247923 0.000741072 0.000081100 0.000195230 0.001404085 -0.000250157 -0.001140177 0.000175530 -0.000484879 -0.000659319 0.000057128 0.000334033 0.000254259 -0.000098116 0.000478338 0.000013658 0.000295142 -0.000452900 -0.000485708 0.000308692 0.000029135 0.000234119 -0.000192189 -0.000278793 0.000057512 0.000033719 -0.000408573 0.000105118 -0.000021267 0.001482624 -0.000003041 -0.000302808 0.000137868 -0.000447641 0.011476873 0.000053551 -0.000330510 -0.000185768 0.000441431 -0.006263434 -0.000009168 0.000279062 0.000162633 -0.000286947 0.004005208 -0.000021527 0.000143467 0.000020988 -0.000109460 -0.000140924 0.000009062 0.000013468 0.000109127 -0.000120514 -0.001188545 0.000007231 -0.000159151 -0.000020629 0.000079719 -0.001506530 0.000023190 -0.000295194 -0.000188653 0.000369703 -0.002411648 0.000020429 0.000072256 0.000056352 -0.000229248 0.001650858 -0.000006623 0.000065212 -0.000050973 0.000074993 -0.001073511 -0.000013359 0.000105366 0.000055335 -0.000094873 0.000752476 -0.000002183 0.000041660 0.000004105 0.000023402 -0.000834370 0.000007454 0.000071133 0.000030233 -0.000141692 -0.000132744 -0.000017083 0.000039465 0.000041459 -0.000137614 -0.000368783 -0.000026705 0.000084493 0.000031159 -0.000065769 -0.000192443 0.000000843 0.000012500 0.000013927 -0.000020117 0.000073244 -0.000000056 0.000031342 -0.000004449 0.000035079 -0.000078063 0.000000280 -0.000004362 -0.000015410 0.000024110 -0.000109869 0.000003630 -0.000028949 -0.000025948 0.000057848 -0.000159928 0.000009313 -0.000107870 -0.000055660 0.000096182 -0.000728531 0.000001007 0.000019451 0.000021538 -0.000006437 0.000033084 -0.000004581 0.000059149 0.000048699 -0.000082494 0.000671885 -0.000002450 0.000020982 0.000005465 0.000018129 0.000199685 -0.000005071 0.000064318 0.000040990 -0.000091218 0.000624548 -0.000001248 -0.000010261 -0.000003836 0.000000852 0.000106151 -0.000001005 0.000018510 -0.000003143 0.000006517 -0.000083082 -0.000000888 -0.000014684 0.000003723 -0.000010547 -0.000089229 -0.000001597 0.000004923 0.000002944 -0.000006004 -0.000016470 0.000002114 0.000017718 -0.000000244 0.000011772 -0.000018108 -0.000001867 0.000004969 -0.000003328 -0.000002490 -0.000022405 0.000000030 -0.000006589 -0.000000405 -0.000003560 0.000004710 0.000000921 -0.000011127 -0.000000357 -0.000009971 0.000001458 0.000000381 0.000006615 -0.000003114 0.000009688 0.000012634 0.000000151 0.000001335 -0.000000653 0.000002410 0.000001950 -0.000000096 0.000007759 0.000000098 0.000005222 -0.000004812 -0.000000419 -0.000001240 0.000000306 -0.000000834 0.000000235 -0.000000043 -0.000003034 0.000001650 -0.000005572 -0.000007007 -0.000000156 0.000000848 0.000000543 -0.000000446 -0.000002900 0.000000561 0.000000277 -0.000000621 0.000001144 0.000001383 -0.000000302 0.000011089 0.000000299 0.000007471 -0.000007240 0.000000223 -0.000002781 -0.000000966 -0.000000679 0.000005090 -0.000000366 0.000000898 0.000000421 0.000000173 -0.000001851 -0.000000919 -0.000001103 0.000003157 -0.000002508 0.000001685 0.000000043 -0.000006222 0.000005815 -0.000014070 -0.000026652 -0.000000177 0.000006100 -0.000006153 0.000012358 0.000027352 0.000001067 0.000000197 -0.000003102 0.000002963 0.000007451 -0.000000533 -0.000015741 -0.000000825 -0.000008694 0.000015242 0.000000192 -0.000000798 -0.000003202 0.000004576 0.000012135 0.000000683 0.000004008 -0.000013368 0.000026498 0.000068023 0.000001150 0.000004018 -0.000007777 0.000011489 0.000034794 0.000000248 -0.000011244 0.000014038 -0.000029968 -0.000057461 -0.000000594 0.000002368 0.000000279 0.000003427 0.000000497 0.000000145 0.000012346 0.000001231 0.000005306 -0.000013364 -0.000000426 -0.000004007 -0.000001223 -0.000000616 0.000007477 0.365409363 -0.247062463 0.521936257 -0.049091639 0.059204888 0.647312168 -0.168589617 0.135855524 0.102952796 0.354605737 0.130219293 -0.252381755 0.036396551 -0.233063461 0.561296363 -0.011773755 -0.021545120 -0.003541090 -0.003919533 0.002201605 0.014438015 -0.000784914 0.014989672 0.000658768 -0.000662327 -0.011166480 -0.001817725 -0.002564444 -0.000892510 -0.001188155 0.028924261 -0.065828313 0.011826823 0.009633012 -0.003578992 -0.105426507 0.037413909 0.011702482 -0.004379099 0.015967527 0.034236466 -0.126244884 -0.017791663 0.022003871 -0.018331447 -0.000002360 -0.000046075 -0.000829015 -0.000366610 -0.000115061 -0.000335416 -0.000832383 -0.000392219 0.000320952 -0.000401257 0.000079954 -0.000904240 -0.000551945 -0.000206667 -0.000120354 -0.002423819 -0.002371948 -0.001115772 0.000836409 -0.000233711 -0.003196900 -0.000644380 -0.000509134 -0.000711608 0.001185785 -0.001138731 0.004832006 0.000865851 0.000051937 -0.000014193 0.000056011 0.000268156 0.000011023 -0.000029671 0.000008458 0.000061260 -0.000074146 -0.000115592 -0.000011722 -0.000003297 0.000004201 -0.000437980 -0.000103315 0.000056210 0.000050666 -0.002299091 0.002029603 0.000944503 -0.002174425 -0.001889279 -0.000905094 0.002281889 -0.011350490 -0.002511165 0.000273475 -0.001044766 -0.004828712 0.019295356 0.005521272 -0.004103502 -0.017899720 0.014686505 -0.272986012 -0.062793198 0.036183614 -0.005695703 0.009631320 -0.059031539 -0.079168570 0.014319206 0.012393273 -0.001701565 0.033676112 0.011517307 -0.082843782 0.001015662 -0.002816144 -0.045233039 -0.026222873 -0.013135665 0.003420943 -0.003702347 -0.044589232 -0.019706011 0.001893033 0.002846864 -0.001455698 -0.050671067 -0.010822541 0.005565344 -0.000402539 0.000530113 0.009717503 0.002038215 -0.005042796 -0.000228495 0.000137960 0.002327438 0.002099332 -0.003618557 -0.000142362 -0.000371089 0.004729327 0.000198278 -0.001015827 0.000518795 -0.000552263 0.001195964 0.001596361 0.000400223 -0.000925555 0.001174912 0.017298539 0.004268126 -0.001369773 -0.000136432 0.000191681 0.005216428 0.000126101 -0.000960702 0.000010265 -0.000016385 -0.000288796 -0.000109273 0.000037221 0.000023658 -0.000018550 -0.000265949 -0.000077290 0.000024468 -0.000025409 0.000018807 0.000310751 0.000091773 -0.000035962 -0.000004343 0.000003743 -0.000002341 -0.000000040 -0.000001197 0.000011753 -0.000006967 0.000017526 0.000006715 -0.000006293 -0.000001039 0.000003237 0.000058296 0.000019312 -0.000010893 0.000015561 -0.000014326 -0.000189132 -0.000061285 0.000040458 -0.000002651 0.000004856 -0.000050154 -0.000022097 0.000009794 0.000022846 -0.000022977 -0.000320275 -0.000093888 0.000053837 0.000007252 0.000009609 0.000217796 0.000089842 -0.000009946 -0.000002555 0.000003514 0.000055015 0.000017901 -0.000013118 -0.000016792 0.000008993 0.000146046 0.000052876 -0.000019561 -0.000002426 0.000003695 -0.000082701 -0.000017363 -0.000009552 -0.000024911 0.000030950 0.000281342 0.000084171 -0.000045101 -0.000018075 0.000032905 0.000643372 0.000215198 -0.000077987 -0.000010115 0.000012248 0.000235528 0.000075339 -0.000037933 -0.000012561 0.000008776 0.000042310 0.000015476 -0.000001661 0.000009149 -0.000001441 0.000042077 0.000018399 -0.000003863 0.000001130 -0.000000483 0.000038953 0.000010685 0.000001004 -0.000007771 0.000004873 0.000018518 0.000003149 -0.000003815 -0.000004787 0.000001223 -0.000044768 -0.000020222 0.000004401 0.000048659 -0.000078470 -0.001642623 -0.000589314 0.000195366 0.000056804 -0.000050519 -0.000948670 -0.000320217 0.000138285 0.000042515 -0.000077818 -0.001608620 -0.000573162 0.000180510 -0.000005326 0.000010477 0.000057560 0.000014922 -0.000016441 0.000030600 -0.000032079 -0.000395443 -0.000111990 0.000047652 0.000009536 -0.000015870 -0.000279790 -0.000080226 0.000034835 -0.000000276 0.000001622 0.000047641 0.000014305 -0.000007661 0.000012241 -0.000007623 0.000006204 0.000003316 -0.000003272 -0.000003206 0.000002117 0.000001406 0.000000554 0.000000411 -0.000003945 0.000003446 0.000053882 0.000018079 -0.000007052 0.000004769 -0.000003522 -0.000011466 -0.000002018 0.000001615 -0.000001673 0.000000557 -0.000004091 -0.000001185 0.000000953 -0.000031632 0.000023446 0.000452510 0.000170857 -0.000080067 -0.000014479 0.000013217 0.000167342 0.000044900 -0.000009579 0.000030459 -0.000015884 -0.000228098 -0.000075892 0.000029731 0.000022198 -0.000015352 -0.000331569 -0.000136082 0.000074017 0.000018931 -0.000015446 -0.000059580 0.000015868 -0.000020497 -0.000049881 0.000035822 0.000507476 0.000154805 -0.000054821 0.000000947 0.000000245 0.000007588 0.000004391 -0.000001174 -0.000001826 0.000001578 0.000020886 0.000002396 0.000001913 0.000001203 -0.000000890 -0.000023065 -0.000005047 0.000000325 0.000000699 -0.000000194 0.000006465 0.000002791 -0.000001935 -0.000002377 0.000001720 -0.000001483 -0.000004704 0.000003075 0.000003244 -0.000005224 -0.000064427 -0.000025403 0.000005326 0.000005173 -0.000003785 -0.000057331 -0.000017163 0.000003712 0.000001715 -0.000000680 -0.000009308 -0.000003194 0.000001491 0.000005970 0.000000721 -0.000055195 -0.000013350 0.000000640 0.000008298 -0.000004176 -0.000080867 -0.000023328 0.000007200 0.000001658 0.000000164 -0.000009837 -0.000002383 0.000000414 0.000007509 -0.000006078 -0.000065780 -0.000018580 0.000008258 0.000001362 -0.000001724 -0.000063095 -0.000023313 0.000001484 -0.000008382 0.000005077 0.000101049 0.000030266 -0.000002271 0.000000540 0.000005167 0.000014860 0.000010431 -0.000005197 -0.000014959 0.000007878 0.000167945 0.000050048 -0.000009374 -0.000004125 0.000002633 0.000049760 0.000014096 -0.000002827 0.000000108 -0.000007779 0.000017287 0.000000721 0.000010618 0.000004526 -0.000001710 -0.000025141 -0.000005489 0.000002093 0.000000631 0.000000273 -0.000003600 -0.000000285 -0.000000362 -0.000000725 0.000001375 0.000007669 0.000002295 -0.000002077 0.000001922 -0.000000577 -0.000012780 -0.000002375 0.000000690 0.000002300 -0.000002111 -0.000019380 -0.000005685 0.000001978 -0.000002794 0.000002648 0.000020779 0.000006497 -0.000003428 -0.000010037 0.000003261 0.000118507 0.000030286 -0.000003339 0.000011850 -0.000007031 -0.000147621 -0.000043892 0.000004335 -0.000008541 0.000000959 0.000094455 0.000026017 -0.000003334 -0.000004821 -0.000002746 0.000063353 0.000014991 0.000004263 0.000002332 -0.000002441 -0.000029087 -0.000007799 0.000002219 0.000000935 0.000004356 -0.000010027 -0.000000029 -0.000004440 -0.000002503 0.000003251 0.000019067 0.000006807 -0.000003764 0.000001050 -0.000000925 -0.000009046 -0.000002378 0.000000622 0.000001676 -0.000001270 -0.000016332 -0.000005099 0.000002053 -0.000001563 0.000000653 0.000017903 0.000005188 -0.000000128 0.000000457 -0.000001022 -0.000007241 -0.000001853 0.000000591 0.000003294 -0.000003055 -0.000027364 -0.000009176 0.000003266 -0.000096511 0.000157023 0.003363583 0.001249775 -0.000256491 -0.000136607 0.000138937 0.002743629 0.000929962 -0.000254141 0.000039322 -0.000022179 -0.000601643 -0.000203816 -0.000026537 0.000115656 -0.000180212 -0.003389866 -0.001224956 0.000159439 0.000192013 -0.000208446 -0.003865818 -0.001254980 0.000325875 -0.000113875 0.000146821 0.003005523 0.001016955 -0.000272742 -0.000726690 -0.000336726 0.000137030 0.000122329 0.000007393 0.000805657 0.000022346 0.000785296 0.000093851 -0.000174979 -0.000303849 -0.000242302 -0.000236357 -0.000074839 0.000076589 -0.000001724 0.000003255 0.000131671 0.000041936 -0.000035124 0.000008057 0.000000719 0.000030778 -0.000019341 0.000056782 -0.000013974 0.000013265 0.000195179 0.000040303 -0.000032459 0.000107144 -0.000096836 -0.001342086 -0.000395429 0.000096426 0.000017296 -0.000026537 -0.000543821 -0.000146913 -0.000019898 -0.000038827 0.000020569 0.000089354 0.000056102 -0.000083076 -0.000113278 0.000106704 0.001788340 0.000531573 -0.000073629 -0.000034062 0.000043677 0.000631862 0.000152043 -0.000012294 0.000041943 -0.000030010 -0.000197965 -0.000054241 0.000035054 0.000192191 -0.000138491 -0.003171950 -0.001039361 0.000127615 -0.000083922 0.000037798 0.000782630 0.000397613 -0.000030546 -0.000269694 0.000192325 0.002055494 0.000659815 -0.000169696 -0.000082615 0.000050395 0.001059707 0.000309055 -0.000114552 0.000036813 -0.000017372 -0.000811032 -0.000249619 0.000131165 0.000065713 -0.000075498 -0.000135600 0.000002899 0.000009864 0.000034992 -0.000001835 0.000043034 0.000078160 -0.000025727 0.000019798 -0.000021569 -0.000046397 -0.000061092 -0.000033417 0.000174228 -0.000105966 -0.001716061 -0.000526362 -0.000347221 -0.000019776 0.000017531 0.000342039 0.000103714 -0.000022418 0.000023747 -0.000012151 -0.000325571 -0.000123947 0.000025216 0.000060826 -0.000046476 -0.000485289 -0.000125441 0.000038660 -0.000066695 0.000053498 0.000643770 0.000202795 -0.000079707 0.000015323 -0.000008373 -0.000037464 -0.000015529 0.000022919 0.000083878 -0.000058348 -0.000618231 -0.000195895 0.000094491 0.000002078 -0.000004422 -0.000039460 -0.000013443 0.000004847 -0.000017979 0.000011099 0.000118360 0.000041965 -0.000022149 -0.000042174 0.000029138 0.000319138 0.000099192 -0.000042344 0.000092950 -0.000057766 -0.000956963 -0.000348342 0.000159425 -0.000035747 0.000019979 0.000656775 0.000201884 -0.000193285 -0.000000085 0.000005675 -0.000201912 -0.000094983 -0.000033974 0.000010791 -0.000011682 -0.000299576 -0.000055284 0.000031174 -0.000047926 0.000027215 0.000616329 0.000181172 -0.000038037 -0.000020087 0.000032999 -0.000021851 -0.000007038 0.000017721 -0.000023060 0.000005952 0.000332225 0.000093401 -0.000032151 0.000008234 -0.000012155 -0.000103029 -0.000048438 0.000014297 0.000008550 0.000001664 -0.000102563 -0.000036416 0.000023615 -0.000051129 0.000010883 0.000636242 0.000192750 0.000136732 -0.000024287 0.000013048 0.000231024 0.000099189 0.000011813 0.000046477 -0.000027282 -0.000549841 -0.000158488 0.000001380 -0.000073829 0.000018710 0.000032303 -0.000012757 0.000464459 -0.000045009 0.000010362 -0.000238733 -0.000004188 0.000266506 -0.000153082 0.000131588 0.002528413 0.000736713 -0.000004868 0.000031767 -0.000022149 -0.000330203 -0.000105350 -0.000088215 0.000053170 -0.000032637 -0.000447565 -0.000148425 -0.000043796 -0.000051888 0.000035231 0.000446965 0.000131827 -0.000044745 -0.000000821 -0.000001390 0.000037898 0.000003524 -0.000000018 0.000003700 -0.000001266 0.000000189 -0.000000680 0.000001620 0.000010254 -0.000007253 -0.000075749 -0.000016661 0.000007063 0.000000516 -0.000000066 -0.000012884 -0.000006550 0.000007464 -0.000001344 0.000001104 0.000088580 0.000022562 -0.000021974 -0.000004508 0.000005710 0.000151923 0.000029360 -0.000013011 -0.000002085 -0.000000028 0.000047353 0.000014082 -0.000012864 0.000005035 -0.000005121 -0.000082945 -0.000029402 0.000000275 0.000002763 0.000000672 -0.000086716 -0.000030544 0.000003283 0.000002738 -0.000001941 -0.000024729 -0.000007039 0.000002138 0.000002926 -0.000002278 -0.000037232 -0.000010363 0.000003938 0.000002449 -0.000000981 -0.000003720 -0.000001832 0.000003606 -0.000004258 0.000003495 0.000040942 0.000012134 -0.000004188 -0.000001955 0.000001968 0.000022804 0.000006945 -0.000003034 0.000003087 -0.000002106 -0.000022610 -0.000007305 0.000004114 0.000004519 -0.000003988 -0.000056766 -0.000016371 0.000006453 0.000003046 -0.000001728 -0.000012695 -0.000005486 0.000003838 0.000001657 -0.000000816 -0.000014706 -0.000004137 0.000002696 0.000550789 -0.002973299 0.015169185 0.010825448 -0.014546560 0.003848070 0.000630983 0.002507510 -0.001379091 0.015638092 0.002097530 0.000412098 0.002191818 0.013907797 -0.023953707 -0.000057192 0.000711900 -0.002485066 -0.000953667 -0.001754193 0.000010370 0.000128504 -0.000267951 -0.000218936 -0.001798753 -0.000610554 -0.000250895 0.001362371 0.001507106 -0.000808351 0.000318659 -0.000061865 -0.001388496 -0.000692039 0.001217718 0.000123392 -0.000026507 -0.000694490 0.000118917 -0.000055831 -0.000152339 0.000366557 -0.000110089 -0.000701762 -0.000602201 0.000034854 0.000083854 -0.000668981 -0.000207931 -0.000156166 0.000231836 -0.000074195 -0.001154277 -0.000197697 0.000273000 0.000089957 -0.000268609 0.000693196 0.000584448 0.000542622 -0.000138345 0.000196954 -0.000100513 -0.000166512 0.000812257 -0.000093699 0.000125513 0.001605683 0.000572251 -0.000767754 0.000238407 0.000098903 0.000014942 -0.000097329 0.000041613 -0.000318204 0.000022326 -0.003156956 0.000009147 0.000979012 -0.000506210 -0.000105841 -0.001814295 -0.001186318 0.001492003 0.000485471 -0.000096738 0.004237652 0.000465347 0.000734780 -0.000163022 0.000058791 0.001678583 0.000795454 -0.000422259 -0.000044345 0.000154348 -0.000480205 -0.000573634 0.000380057 -0.000124120 -0.000071983 0.000696015 0.000329296 -0.000000252 0.000043654 -0.000030504 0.000050325 0.000078287 0.000073928 0.000005293 0.000017284 -0.000217459 -0.000100954 -0.000011873 -0.000037669 -0.000012064 0.000364949 0.000108811 -0.000039376 -0.000103306 -0.000100799 0.001273654 0.000454928 -0.000041743 -0.000007220 -0.000098199 0.000556384 0.000227430 0.000212346 0.000044207 0.000150755 -0.000985018 -0.000311864 -0.000258572 -0.000011736 -0.000033572 -0.000001297 -0.000099134 0.000063117 -0.000031762 0.000012987 -0.000185844 -0.000058908 0.000050064 0.000028267 -0.000012756 0.000301161 0.000053140 -0.000069442 0.000005257 -0.000074626 0.000644504 0.000242490 -0.000546110 -0.000103612 0.000049500 -0.000202723 0.000158270 -0.000079687 -0.000049866 0.000021446 -0.000254919 0.000040616 -0.000308269 -0.000158670 -0.000011459 -0.000367003 -0.000045486 0.000069571 -0.000234843 0.000013592 -0.000225680 -0.000034292 0.000046836 -0.000148722 -0.000010958 0.000066264 0.000039212 -0.000005387 -0.000018850 0.000000815 -0.000024034 -0.000006055 0.000025635 0.000028488 -0.000092166 -0.000003926 -0.000004670 -0.000008834 0.000120692 0.000039313 0.000090581 0.000004825 -0.000025773 -0.000130727 0.000074741 -0.000150395 -0.000044238 0.000056716 -0.000084849 0.000068598 -0.000140410 -0.000033653 0.000045954 -0.000010641 0.000003388 -0.000107061 -0.000014397 0.000020491 0.000101012 -0.000066388 0.000015250 0.000016549 -0.000014984 0.000035686 -0.000035578 -0.000163617 -0.000035797 0.000011850 -0.000004323 0.000014711 0.000042707 0.000008075 -0.000007076 -0.000080533 0.000008004 -0.000174796 -0.000059705 -0.000005115 -0.000065193 0.000112939 -0.000154667 -0.000043635 0.000088289 0.000005381 0.000057756 0.000054736 0.000040144 0.000022737 0.000013013 -0.000037406 0.000041173 0.000006542 0.000001297 0.000019995 -0.000012272 0.000094000 0.000028999 -0.000023552 -0.000015773 -0.000034999 -0.000180324 -0.000045405 0.000015283 -0.000015890 -0.000000958 -0.000056574 -0.000013694 0.000013497 -0.000019074 0.000001727 0.000003172 0.000003867 -0.000001150 -0.000003200 -0.000002903 -0.000061758 -0.000017605 0.000013412 0.000198993 -0.000123638 0.000076139 0.000022850 -0.000050785 0.000222734 -0.000133403 -0.000005951 0.000004632 -0.000031217 0.000040901 -0.000053434 -0.000274814 -0.000080172 0.000050435 -0.000007008 0.000003638 -0.000020091 -0.000003939 0.000000834 -0.000006720 -0.000000438 -0.000006107 0.000000139 0.000000417 0.000001067 -0.000000145 -0.000080075 -0.000024698 0.000015615 0.000016931 0.000002138 0.000074578 0.000026136 -0.000001689 0.000015119 -0.000042622 0.000055183 0.000018883 -0.000017742 0.000014992 -0.000067411 -0.000233713 -0.000074210 0.000023936 0.000039713 0.000019006 -0.000562922 -0.000139190 -0.000019268 -0.000012576 -0.000004664 0.000018411 0.000007435 0.000032535 -0.000016212 -0.000071525 0.000406838 0.000097664 0.000120890 0.000048404 0.000023768 -0.000621090 -0.000176951 -0.000012381 0.000021403 0.000052657 -0.000584023 -0.000214598 -0.000093446 -0.000017299 -0.000022886 0.000188946 0.000009753 0.000008584 -0.000052062 0.000030715 0.000034330 0.000011170 0.000005728 -0.000118427 0.000073265 0.000012937 0.000000547 0.000012758 -0.000049352 0.000040298 0.000155026 0.000046321 -0.000023517 -0.000107595 0.000063625 -0.000043958 -0.000012513 0.000033753 -0.000066647 0.000037586 -0.000021138 -0.000008695 0.000015812 0.000012853 -0.000000177 0.000205113 0.000062087 -0.000045470 0.008792638 -0.023489954 0.005584365 -0.003747044 0.010590663 0.020565881 -0.017626702 0.009964367 -0.019179318 0.024452860 -0.021244299 0.030741919 -0.014015520 0.021394218 -0.044360911 -0.027283931 -0.002366212 0.001197593 -0.037800848 0.067312715 -0.085467246 0.019721103 -0.017808609 -0.009817859 0.016690924 0.024324655 -0.098074021 0.025747654 0.009125295 -0.006228907 -0.005431998 0.005601710 -0.007774443 0.009357012 -0.017939369 -0.000627616 0.008146899 -0.003315607 0.004253546 -0.009071898 0.008495340 -0.007932082 0.003358499 -0.005761557 0.009909914 -0.003291457 0.003427711 -0.000580113 0.003150217 -0.005674891 0.003022329 -0.004868306 0.003394261 -0.004553124 0.009474961 -0.008268550 0.009810050 -0.006933239 0.010604208 -0.019671289 0.000699271 -0.001174058 0.000291104 0.000129890 -0.000114379 0.000250633 -0.000230609 -0.000077156 -0.000050346 -0.000197996 0.000010896 0.000124623 0.000278760 -0.000144077 0.000204760 0.000062058 0.000126147 0.000110645 0.000065543 -0.000074504 -0.000461568 -0.000498981 0.000131225 -0.000031880 0.000262525 -0.000451987 0.000053782 -0.000223762 0.000138729 -0.000237833 -0.027055776 0.041418664 -0.008348423 0.009600247 -0.019285117 -0.006815106 0.014279358 -0.004379685 0.010957362 -0.010838958 0.010921279 -0.008716093 0.003010635 -0.007135840 0.018166332 0.009875438 -0.013100396 0.006578216 -0.012014305 0.022739652 0.002644681 0.005016061 -0.000279076 0.000830099 -0.000703515 0.007415014 -0.007689991 0.003161976 -0.003933768 0.007571859 0.000180495 0.000534474 0.000078247 0.000230580 -0.000357865 -0.001506735 -0.001413430 0.000121564 -0.000451686 0.000297042 -0.001254576 -0.000437642 -0.000293811 -0.000236243 0.000093758 -0.000538081 0.001129135 -0.000188771 0.000001002 0.000165327 0.000127664 0.000192481 0.000168528 -0.000552318 -0.000115414 0.000246371 -0.000237566 0.000057653 -0.000407548 0.000108870 0.023867463 -0.003945186 -0.005212836 -0.000603718 -0.001208578 -0.009683694 0.010212759 0.001309570 0.002322451 -0.002522149 0.020494139 -0.004635003 -0.003897373 -0.001001155 0.000149110 -0.001736630 -0.000303963 0.000378684 0.000665935 -0.000159274 -0.005161366 0.000390161 0.001049743 0.000035592 0.000201211 -0.000766442 0.004061426 0.000730542 0.000122222 0.000169494 0.000632424 0.000436944 0.000408032 0.000016123 -0.000203699 -0.000262530 -0.002715933 -0.000624882 0.000029736 -0.000596841 0.000978974 -0.001371212 0.000164726 -0.000103633 -0.000053274 0.000581379 -0.000740676 -0.000064638 -0.000105012 0.000262070 0.000087065 0.000636803 0.000137208 0.000052450 0.000220034 0.000662516 -0.000453842 -0.000011508 -0.000173062 0.000260237 0.000282790 0.000150845 -0.000049452 -0.000238156 0.000415730 -0.000730338 -0.000335600 -0.000408247 -0.000148326 0.000453108 0.000029222 0.000137673 -0.000139562 -0.000066564 0.000325764 -0.000036349 -0.000148784 0.000008410 -0.000006153 -0.000008524 0.000090058 -0.000066848 0.000022233 -0.000023698 -0.000020137 -0.000002841 0.000159887 0.000004004 0.000018407 0.000003656 0.001424171 -0.000330613 -0.000645791 -0.000136975 0.000024834 0.000196383 -0.000624793 0.000082595 0.000123411 -0.000211905 0.000818207 0.000141516 -0.000340629 -0.000093048 0.000012041 -0.000151865 0.000842952 0.000094007 0.000018789 0.000122576 -0.000090427 0.000002787 -0.000284008 -0.000097466 -0.000069371 -0.000061323 0.000212285 0.000045471 -0.000003642 0.000068507 0.000077072 -0.000109532 -0.000066346 -0.000002078 0.000003236 -0.000387115 -0.000036385 0.000153827 0.000015228 -0.000000784 0.000062957 0.000173477 -0.000063314 -0.000032448 0.000032146 0.000019527 0.000017135 -0.000024982 -0.000024590 0.000041887 -0.000014539 -0.000024934 0.000063815 0.000019660 -0.000018500 -0.000032867 -0.000011938 -0.000043229 -0.000023940 0.000029585 -0.000001260 0.000000088 -0.000024720 -0.000008894 0.000001051 -0.000007398 0.000003032 0.000004729 0.000000574 -0.000005890 0.000013459 -0.000009655 -0.000095529 -0.000025319 0.000029759 0.000003471 -0.000002931 -0.000023053 -0.000006392 0.000004739 0.000004304 -0.000001708 0.000014606 0.000005599 -0.000002270 -0.000003241 0.000002162 0.000008173 0.000002003 -0.000000902 -0.000005983 0.000004324 0.000053531 0.000014559 -0.000011409 -0.000002861 0.000002535 0.000025037 0.000007862 -0.000005290 0.000005327 -0.000004256 -0.000027155 -0.000008102 0.000003146 0.000003827 -0.000001755 0.000025740 0.000009536 -0.000002637 0.000002114 -0.000002422 -0.000034486 -0.000010701 0.000006358 -0.000004158 0.000003058 0.000021844 0.000007133 -0.000003409 -0.000003928 0.000007574 0.000043006 0.000013470 -0.000019010 -0.000018119 0.000012899 0.000175830 0.000046354 -0.000040496 0.000010553 -0.000006424 -0.000129584 -0.000029660 0.000079415 0.000007656 -0.000007159 -0.000078686 -0.000016615 0.000010329 -0.000011014 0.000005597 -0.000040231 -0.000015635 0.000011177 0.000002529 -0.000003909 -0.000092518 -0.000025415 0.000010761 0.000033125 -0.000028531 -0.000419019 -0.000122533 0.000108830 0.000017918 -0.000016968 -0.000222775 -0.000047197 0.000034527 -0.000028387 0.000020610 0.000348967 0.000082214 -0.000144294 0.000001818 -0.000000548 0.000003612 0.000003411 0.000014888 0.000008229 -0.000002439 0.000061520 0.000018554 -0.000009707 -0.000004300 0.000001279 -0.000033903 -0.000009305 0.000006987 0.543551629 0.055995332 0.695652948 0.228694812 -0.025648597 0.332759027 -0.217249046 -0.132021666 -0.090008607 0.524392965 -0.076802219 -0.212084905 -0.035294308 0.059791506 0.666019924 -0.093093399 -0.075719184 -0.127374414 0.234046631 -0.015966093 0.015236014 0.030587417 0.001967379 -0.006561565 -0.017141146 0.073687083 -0.002261744 0.049385919 -0.017860569 -0.054672577 -0.000247251 0.019993142 0.004436771 -0.000899964 -0.006837285 -0.212492011 0.052586100 -0.092823290 -0.032998811 -0.036433449 -0.003751534 -0.123662212 -0.003312244 0.002127286 0.052476853 -0.080638719 0.032475566 -0.121259711 -0.025315825 -0.025262456 0.003521315 -0.000170240 -0.002708890 0.000051885 -0.000749670 -0.001948590 -0.003959438 0.000302363 -0.000179048 -0.000834654 -0.003333248 0.001110943 0.005972287 0.000882106 0.000373058 -0.075320118 0.033958951 -0.010224445 0.009589436 -0.027714953 0.030613140 -0.289211880 0.025008006 -0.000750172 -0.059626229 -0.008484033 0.028611693 -0.069034304 -0.001265114 -0.003303667 0.003155415 -0.014047013 0.001346544 -0.004726342 0.005998955 -0.000300813 -0.009490271 0.003801238 -0.004177639 -0.000972326 0.002052506 -0.015214348 0.000554787 0.000855444 -0.000857794 0.001018659 -0.012780975 -0.001269242 0.002975767 0.000517637 -0.005589168 -0.040125909 0.030274600 0.002304151 0.000158294 -0.008488966 0.073019844 -0.021243540 0.002651681 -0.015328606 -0.002803151 0.012594730 -0.002715753 -0.000418596 -0.002380901 0.000747085 0.002868442 -0.001272840 0.000465827 0.000304214 0.002323479 -0.012201198 0.002064614 -0.000546104 0.002280846 0.001925397 -0.000686909 0.001281883 -0.000234489 0.000243842 -0.000458322 0.010544990 0.002378982 -0.000092919 -0.001372257 0.001805079 -0.009387640 -0.001036692 -0.000870317 0.002262502 0.000057436 -0.000376931 0.000028863 0.000029080 0.000066818 0.000024518 -0.000140086 0.000040265 0.000007598 0.000021369 -0.000025242 0.000279880 -0.000032406 0.000006318 -0.000047691 0.000017791 -0.000064567 0.000013941 -0.000001348 0.000011239 -0.000028023 0.000045194 -0.000012337 0.000000638 -0.000009311 -0.000012080 0.000044013 -0.000006283 -0.000001293 -0.000008080 0.000041572 -0.000341567 0.000052335 0.000009645 0.000060294 0.000024405 -0.000122649 0.000029322 0.000002101 0.000024674 0.000056106 -0.000400366 0.000067470 0.000013998 0.000072891 -0.000027058 0.000100292 0.000042612 -0.000013638 -0.000018780 -0.000007483 0.000114480 0.000001628 -0.000004939 -0.000020943 -0.000010700 0.000292663 -0.000005890 -0.000007106 -0.000050444 0.000037433 -0.000125181 0.000034021 -0.000003678 0.000029006 -0.000023061 0.000279794 -0.000043960 -0.000008908 -0.000047363 -0.000124128 0.000707750 -0.000056687 -0.000035997 -0.000132414 -0.000047772 0.000343598 -0.000046380 -0.000014528 -0.000063183 0.000026355 -0.000037465 0.000009027 -0.000004523 0.000006018 -0.000014653 -0.000024354 0.000011653 0.000000272 0.000003729 -0.000024010 0.000140475 -0.000022422 0.000000336 -0.000026677 0.000005301 -0.000001813 -0.000008004 -0.000001488 0.000000660 0.000016980 -0.000024704 -0.000008427 -0.000004049 0.000003232 0.000316095 -0.001670391 0.000085880 0.000084783 0.000301788 0.000203232 -0.001001922 0.000122350 0.000027776 0.000182157 0.000254142 -0.001733355 0.000046117 0.000077355 0.000308134 -0.000004119 0.000052913 -0.000009774 0.000001243 -0.000010920 0.000058639 -0.000398058 0.000076855 0.000011276 0.000078702 0.000035165 -0.000176714 0.000008211 0.000011754 0.000034103 -0.000017290 0.000076652 -0.000012796 -0.000000340 -0.000013542 -0.000031507 0.000084481 -0.000012186 0.000002796 -0.000014729 0.000007164 -0.000021411 0.000003094 -0.000000691 0.000003942 -0.000007836 0.000073350 -0.000006557 -0.000002456 -0.000012903 -0.000007889 0.000025007 -0.000001616 -0.000000189 -0.000004213 0.000007047 -0.000018441 0.000004868 0.000000330 0.000003288 -0.000122618 0.001028086 -0.000100499 -0.000058859 -0.000172838 0.000004132 -0.000040807 -0.000006578 0.000007756 0.000006012 0.000025775 -0.000417659 0.000040815 0.000015145 0.000067119 0.000124061 -0.001000259 0.000104039 0.000066982 0.000163826 -0.000091108 0.000600054 -0.000043130 -0.000054827 -0.000095136 -0.000030037 0.000397010 -0.000055712 -0.000003588 -0.000068305 -0.000004460 0.000025161 -0.000001582 -0.000002678 -0.000004450 0.000006294 -0.000066860 0.000003697 0.000006637 0.000010544 -0.000001937 0.000028045 -0.000001873 -0.000004885 -0.000004520 -0.000003835 0.000030469 -0.000003108 -0.000000553 -0.000005800 0.000015179 -0.000085646 0.000007103 0.000008917 0.000013486 0.000014061 -0.000081941 0.000011813 0.000013165 0.000015276 0.000001814 -0.000014609 0.000003985 -0.000000022 0.000002548 0.000000584 -0.000005346 0.000000721 0.000000619 0.000000215 -0.000005670 -0.000012884 0.000000929 -0.000011040 0.000000687 0.000002546 -0.000065263 0.000009361 -0.000004019 0.000010855 -0.000000739 0.000000610 -0.000000335 -0.000002868 -0.000001143 0.000001099 -0.000022104 0.000005563 -0.000000137 0.000004035 0.000009699 -0.000025001 0.000005489 0.000006013 0.000004385 -0.000004079 0.000022468 -0.000007849 -0.000001239 -0.000002990 -0.000011609 0.000026682 -0.000006368 -0.000015467 -0.000006633 -0.000002037 0.000068477 -0.000012152 0.000004926 -0.000011511 -0.000001205 0.000010802 -0.000003087 0.000001781 -0.000001726 0.000008836 -0.000031355 0.000006118 0.000017429 0.000007823 -0.000005819 -0.000011745 0.000001447 -0.000005030 0.000002289 -0.000002432 -0.000000650 0.000000074 -0.000001203 0.000000528 -0.000001376 -0.000006419 -0.000000570 -0.000001906 0.000000873 -0.000003110 -0.000004235 0.000000205 -0.000002420 0.000001074 -0.000000668 -0.000008969 0.000001762 -0.000000184 0.000001937 -0.000000569 0.000016218 -0.000003001 -0.000001496 -0.000003151 0.000001980 0.000034584 -0.000006612 0.000008591 -0.000005355 0.000006616 -0.000033295 0.000012128 0.000000959 0.000004679 0.000001938 0.000033864 -0.000004344 0.000011399 -0.000004031 0.000006775 -0.000007548 0.000000950 0.000014720 0.000002942 0.000000350 -0.000004903 0.000002116 0.000000048 0.000001404 -0.000006640 0.000013732 -0.000003480 -0.000011552 -0.000003822 -0.000001935 0.000016606 -0.000003353 -0.000003364 -0.000003343 -0.000000677 0.000000717 0.000000191 -0.000001214 -0.000000091 0.000001133 -0.000012569 0.000002237 0.000000508 0.000002208 0.000000141 0.000004371 -0.000000785 0.000001361 -0.000000525 -0.000000303 0.000000228 0.000000657 -0.000000143 0.000000535 0.000001179 -0.000018568 0.000003473 0.000002000 0.000003445 -0.000482995 0.003679983 0.000064448 -0.000129388 -0.000670972 -0.000301418 0.002726464 -0.000101703 -0.000057647 -0.000472206 -0.000086033 -0.000469215 -0.000065631 -0.000046836 0.000069400 0.000499334 -0.003517804 -0.000272585 0.000073022 0.000684722 0.000427365 -0.003656378 0.000030290 0.000077727 0.000666951 -0.000268360 0.002697196 -0.000068418 -0.000012429 -0.000471620 -0.025757298 -0.015730067 -0.010148882 -0.000063633 0.002969472 -0.003259438 0.014752586 -0.000425852 0.002935203 0.000218654 -0.015415769 -0.010248646 -0.000483637 -0.002988579 0.001809608 -0.000047052 0.000289089 -0.000049322 -0.000007309 -0.000049417 0.000076092 -0.000752588 0.000068017 0.000056426 0.000115261 -0.000001177 -0.000074875 -0.000026496 0.000029032 0.000011407 0.000059055 -0.000188977 0.000107958 0.000003094 0.000052471 -0.000004636 0.000499324 -0.000013165 -0.000039488 -0.000068569 -0.000057351 0.000953864 -0.000090332 -0.000072208 -0.000152476 -0.000087813 -0.000119659 -0.000104678 -0.000011162 0.000001229 0.000025525 -0.000470949 0.000002466 0.000069015 0.000048451 -0.000028799 -0.000155613 0.000027601 -0.000021183 0.000037121 0.000313230 -0.000783938 0.000246271 0.000195542 0.000102819 -0.000288840 0.001603840 -0.000198020 -0.000264954 -0.000190571 0.000013542 0.000488278 -0.000177916 0.000138377 -0.000117109 -0.000123886 0.000538199 -0.000204934 0.000019092 -0.000059496 0.000245114 -0.000861189 0.000190623 0.000092109 0.000132352 -0.000232164 0.000387534 -0.000037271 -0.000108233 -0.000015930 -0.000095007 0.000243156 -0.000030547 -0.000075155 -0.000045653 0.000016827 -0.000054377 -0.000016541 0.000082741 -0.000008571 0.000106178 -0.000524067 0.000091034 0.000008214 0.000059003 -0.000050539 0.000176432 -0.000038109 -0.000038628 -0.000024707 0.000067548 -0.000319361 0.000044997 0.000067813 0.000040100 -0.000032978 -0.000057746 0.000033026 -0.000031067 0.000020529 -0.000046976 0.000487831 -0.000083968 -0.000034652 -0.000088118 0.000005288 -0.000180790 0.000017591 0.000013487 0.000027651 0.000030827 -0.000631159 0.000088007 0.000039943 0.000105526 0.000005151 -0.000022278 0.000005918 0.000005413 0.000006023 -0.000013385 0.000173713 -0.000021545 -0.000017555 -0.000027054 -0.000009788 0.000257088 -0.000036201 -0.000014239 -0.000043117 0.000151544 -0.000747995 0.000233979 -0.000049642 0.000043420 -0.000238229 0.001273325 -0.000286203 -0.000071057 -0.000175690 0.000065728 -0.000067708 0.000109727 0.000016806 0.000034990 0.000060080 -0.000045208 0.000019865 -0.000019679 0.000039753 -0.000006662 -0.000109050 -0.000025415 0.000030915 0.000013232 0.000056017 -0.000264062 0.000029755 0.000087357 0.000001318 -0.000047856 0.000134657 -0.000046421 0.000004103 -0.000019904 0.000027815 -0.000182989 0.000038463 0.000001546 0.000021225 0.000033310 -0.000150596 0.000054345 -0.000031332 0.000014508 -0.000010119 0.000071997 -0.000021074 -0.000006932 0.000008659 0.000025199 -0.000138807 0.000019076 0.000002279 0.000027121 0.000044138 -0.000242402 0.000044255 0.000001979 0.000030669 0.000004919 -0.000001295 -0.000009756 0.000022452 0.000007987 -0.000021071 0.000137915 -0.000003140 -0.000025176 -0.000016245 -0.000072802 0.000369322 -0.000112443 -0.000069806 -0.000007284 0.000033815 -0.000161096 0.000017411 0.000024399 0.000022892 0.000072188 -0.000411469 0.000077660 0.000012863 0.000061144 -0.000069878 0.000521472 -0.000093316 -0.000005037 -0.000080644 0.000003097 -0.000013395 0.000000981 0.000007691 0.000000637 -0.000011186 0.000021064 -0.000001492 -0.000007914 -0.000003850 -0.000015213 0.000032828 0.000001196 -0.000017089 -0.000002453 0.000005119 -0.000039913 0.000005219 0.000010855 0.000003993 -0.000013070 0.000031710 -0.000009310 -0.000017253 -0.000005111 -0.000004128 -0.000017100 -0.000005857 0.000005770 -0.000004273 -0.000007718 0.000042529 -0.000007745 -0.000013053 -0.000005902 0.000014253 -0.000048140 0.000009153 0.000008660 0.000007275 0.000020670 -0.000074238 0.000010959 0.000015436 0.000008149 0.000000509 -0.000008665 0.000001581 0.000000267 0.000001371 0.000002399 -0.000012990 0.000003651 0.000000718 0.000002594 0.000000436 -0.000028661 0.000002103 0.000001839 0.000004139 -0.000001286 0.000015546 -0.000003493 -0.000000748 -0.000002938 -0.000002251 0.000009436 -0.000002609 -0.000001613 -0.000001909 0.000001610 -0.000027619 0.000003928 0.000001935 0.000004741 0.000004062 -0.000022874 0.000006048 0.000002255 0.000004847 0.000002359 -0.000035813 0.000003747 0.000003849 0.000005325 0.000001393 -0.000020770 0.000002537 0.000000666 0.000003391 -0.000128591 0.000612899 -0.000056481 0.000637708 0.000574108 0.000064331 0.000367582 -0.000050682 0.000119300 -0.000110014 0.000023108 -0.000220112 0.000067191 0.000063644 0.000511352 0.000120249 -0.000417942 0.000079214 -0.000096628 0.000162602 -0.000064978 0.000079667 0.000029161 -0.000088639 0.000038583 -0.000063940 0.000389507 -0.000047763 0.000207345 -0.000038052 0.000003796 -0.000095503 -0.000000786 0.000017601 -0.000035914 0.000038913 -0.000187956 0.000028886 0.000008996 0.000039907 0.000019102 -0.000193975 0.000035619 -0.000158746 0.000045355 -0.000021060 -0.000017214 -0.000003224 -0.000109652 -0.000020778 -0.000038301 -0.000001467 -0.000014893 -0.000081976 -0.000048694 0.000014023 0.000155014 -0.000024836 0.000214863 -0.000016433 -0.000002223 0.000016102 0.000007584 -0.000030914 -0.000055032 0.000047657 -0.000060149 0.000030156 0.000088684 0.000088917 0.000007428 -0.000091068 0.000008483 -0.000011481 -0.000012943 0.000005536 -0.000091628 -0.000018109 -0.000099986 -0.000111051 -0.000022187 -0.000009484 -0.000048009 -0.000169205 -0.000085201 0.000022077 0.000205349 -0.000009032 0.000131760 0.000069397 -0.000102412 0.000572392 -0.000043866 0.000030549 -0.000102223 0.000043099 -0.000106393 0.000018709 0.000030114 -0.000006716 -0.000073655 0.000543617 -0.000055451 0.000008419 -0.000086601 0.000000377 0.000014812 -0.000005969 0.000000425 -0.000007730 0.000009702 -0.000059373 0.000007238 -0.000005042 0.000010163 -0.000016269 0.000139355 -0.000008710 0.000016853 -0.000021496 0.000086458 -0.000005028 0.000006181 0.000255472 0.000050868 0.000053402 0.000085859 0.000001299 0.000160710 0.000001685 -0.000107978 0.000221666 -0.000038131 -0.000291722 -0.000074435 -0.000000089 0.000005874 -0.000001809 -0.000005830 0.000001121 0.000000497 -0.000000017 -0.000001954 -0.000012723 -0.000007273 -0.000001254 0.000016576 -0.000000955 0.000014325 0.000008364 -0.000004163 0.000027918 -0.000009167 0.000039123 0.000011920 0.000005493 -0.000058944 0.000012574 -0.000011304 -0.000002783 0.000005508 -0.000091979 0.000020267 -0.000021033 0.000045405 0.002483927 -0.004641978 0.001850211 -0.000622796 -0.000408235 -0.001192584 -0.004948071 0.000402010 -0.000163419 0.000471884 -0.000811053 -0.000602550 -0.000501538 0.000016854 0.000161109 -0.000425728 0.000311383 0.000053901 0.000146401 -0.000067143 -0.000830856 0.001784380 -0.000152734 0.000010343 -0.000083290 0.000844337 0.001606068 0.000134602 0.000265499 -0.000595777 0.000843508 -0.000702513 -0.000377194 -0.000081733 0.000037794 0.000639619 -0.001857228 0.000235202 -0.000123578 0.000219647 0.000114462 -0.000857197 0.000133823 -0.000059923 0.000134930 -0.001018479 0.000386509 0.000556525 0.000086231 0.000135046 -0.000409645 -0.001542601 0.000564957 -0.000101892 0.000219053 0.000688886 0.000804078 0.000401008 0.000031132 -0.000211431 0.000130336 -0.002307546 -0.000569262 0.000072901 0.000469194 0.003281598 -0.000267583 0.000646785 -0.000522159 -0.000824776 0.000182965 0.001588740 -0.000852156 0.000348393 0.000011439 -0.000417411 0.000273480 -0.000290122 0.000066782 0.000259410 0.000483843 0.000445698 0.000252365 -0.000012034 -0.000334969 -0.000395266 -0.000464391 0.000176974 -0.000089503 0.000182367 -0.000019966 -0.000312305 0.000042600 -0.000017630 0.000045854 -0.000085972 -0.000202601 -0.000021917 -0.000004330 0.000038529 0.000028042 -0.000209407 0.000017477 -0.000019903 0.000023104 -0.000780534 0.001381900 -0.000071896 0.000128604 -0.000141078 -0.000613961 0.001557277 -0.000037819 0.000116603 -0.000267261 -0.000272435 -0.000164394 0.000039587 0.000029514 0.000138607 0.000059824 -0.000235462 0.000097519 -0.000012517 0.000033340 0.000031715 -0.000128296 0.000069895 -0.000007990 0.000041979 0.000053594 -0.000222293 0.000008845 -0.000002422 0.000009117 0.000025064 0.000289481 -0.000160426 -0.000082169 -0.000093219 0.000042221 -0.000413439 -0.000559899 -0.000112517 -0.000174250 -0.000205917 -0.002731351 -0.000120182 -0.000172807 0.000317796 -0.000045659 0.000039407 -0.000002849 -0.000110985 -0.000022081 -0.000001793 -0.000054066 0.000000783 -0.000002152 0.000008088 0.000066272 -0.000195060 0.000027545 0.000152996 0.000050644 -0.000041162 -0.000040592 0.000001446 -0.000112363 -0.000011967 -0.000032114 -0.000096824 0.000005139 -0.000113387 -0.000000654 0.000036531 -0.000121476 0.000018500 0.000073057 0.000031190 0.000083209 -0.000156296 0.000064358 -0.000022650 0.000029428 0.000333869 -0.000886213 0.000061707 -0.000062124 0.000135644 0.000163733 -0.000204801 -0.000024707 -0.000042421 -0.000010855 0.000372964 -0.000515733 0.000060009 -0.000055911 0.000070154 0.000114271 -0.000382286 0.000069609 -0.000016623 0.000077958 -0.000146778 0.000301814 -0.000048877 0.000005829 -0.000056839 -0.000775948 0.000552492 -0.000413947 -0.002832745 -0.002947410 0.000282508 0.000206271 -0.000186179 -0.002826931 0.003290794 0.000407337 -0.000962841 0.000608535 0.003867513 0.001715190 0.000366798 0.004647278 -0.000384834 -0.025774551 -0.002291818 0.001957103 -0.001385838 0.001757278 0.005277786 0.008499511 -0.002112335 0.003584089 -0.002471553 -0.019865412 -0.006672474 0.000037185 0.000447032 0.000029847 -0.000079405 -0.000502095 0.000154204 -0.000223672 0.000135317 0.000878557 0.000124860 -0.000222845 0.000495473 -0.000234852 -0.001511351 -0.000379468 0.000080497 -0.000262985 0.000203001 0.000239371 -0.000019922 -0.000018888 -0.000013770 -0.000024274 -0.000383834 -0.000005727 0.000072476 0.000052888 0.000085823 0.000646540 -0.000380774 -0.000064233 0.000153039 -0.000053237 -0.000294933 -0.000234368 0.000004102 0.000030842 -0.000005413 -0.000096207 0.000102840 0.000026905 0.000027812 0.000011714 0.000034512 0.000101863 0.000020454 0.000077381 0.000002220 0.000003181 -0.000005633 -0.000009695 0.000015613 -0.000006996 0.000016779 -0.000001991 0.000023238 0.000044840 0.000023054 0.000004978 0.000024492 0.000532990 -0.000414641 0.000500879 0.001274363 -0.000744526 0.000004857 0.000077005 0.000245341 0.001349552 -0.002298479 -0.000212830 -0.000215614 -0.000411119 -0.001575871 -0.001257965 -0.000013310 0.000174950 -0.000133991 -0.001022084 0.000406342 -0.000028197 -0.000093014 -0.000181138 0.000283206 -0.000101617 0.000249153 0.000152236 0.000271419 -0.001122909 0.000222603 0.000042699 -0.000264632 0.000047971 -0.001288179 -0.000422643 -0.000258334 -0.000165723 -0.000102973 0.000192499 0.000036897 0.000221869 0.000491034 0.000289566 0.000310487 0.000341284 -0.000020049 0.000018432 0.000000770 0.000115658 -0.000057458 -0.000021451 0.000002181 0.000003320 0.000046608 0.000141048 -0.000010785 -0.000017480 -0.000003865 -0.000022020 0.000095850 0.019504598 -0.015594399 0.012275512 -0.107855694 0.027365145 -0.055182749 -0.045977901 -0.033742999 0.042384541 -0.254556928 0.011453748 -0.008344361 0.011352920 -0.025754966 0.023094760 -0.037174126 -0.008106391 -0.019501304 0.008336815 0.046248811 -0.031314165 -0.004702479 -0.019738185 0.032567305 0.015226693 -0.016661356 -0.005587515 -0.016028104 -0.000583452 0.027669420 0.009427500 0.003671241 0.002040899 0.008811073 -0.010297879 0.027087443 0.004810679 0.016693323 -0.025086730 -0.058527612 0.002977573 0.003342768 0.006823222 0.003574892 -0.006161755 0.013055783 0.002804087 0.008032924 -0.003741727 -0.016811142 -0.017262300 -0.004598803 -0.010542361 0.001229825 0.021710476 0.009766371 0.001821990 0.006423803 -0.006702781 -0.012621460 -0.000433036 -0.000020507 -0.000057691 -0.000899266 0.001320416 0.000141063 0.000372199 0.000105585 0.000173477 0.000228051 0.000162395 0.000251603 -0.000120917 0.001102625 0.000355665 -0.000161741 0.000167557 0.000359801 0.000243180 -0.000001425 0.000001063 -0.000161678 -0.000030379 -0.001109528 -0.000082457 0.000489972 0.000101994 -0.000331513 0.000036078 -0.000077354 0.003323919 0.001348421 0.002351018 -0.003364501 -0.004737383 0.022548873 0.003097215 0.013903046 -0.004755620 -0.018725229 0.001484984 0.000510135 0.000298916 -0.005704376 -0.001813205 -0.017734961 -0.003854510 -0.011157320 0.003505997 0.018761694 -0.004678879 0.000318330 -0.003117093 0.000082879 0.003509160 -0.013285600 -0.002782325 -0.007705951 0.003119252 0.013790282 0.000280546 -0.000177715 0.000286624 -0.000118044 -0.000352428 0.000183921 0.000244582 0.000109686 0.001210776 0.000067636 0.000073531 -0.000201892 -0.000075843 -0.000197485 -0.000094540 -0.000295445 -0.000026515 -0.000246226 -0.000122915 0.000336612 -0.000145319 0.000153712 -0.000097452 0.000059141 0.000110424 -0.000180920 0.000048582 -0.000038727 0.000462803 0.000106174 0.000007547 -0.000031046 0.000004531 0.000003574 0.000006856 0.000009010 0.000026285 -0.000003949 -0.000000997 -0.000002846 0.000012187 -0.000121865 0.000025412 0.000000106 0.000018427 0.000000318 -0.000022542 0.000004096 0.000000350 0.000004046 -0.000014447 0.000034831 -0.000005606 -0.000000403 -0.000006206 0.000004949 -0.000012365 0.000001509 -0.000000415 0.000002359 -0.000004702 0.000052800 -0.000011053 0.000000751 -0.000008770 -0.000002537 0.000027147 -0.000004797 -0.000001792 -0.000004823 -0.000004159 -0.000005122 0.000000993 0.000001962 0.000001323 -0.000016827 0.000042763 -0.000007917 -0.000002918 -0.000007255 0.000007436 -0.000038252 0.000007602 0.000001197 0.000006668 0.000001124 0.000012213 -0.000002034 -0.000003192 -0.000002093 0.000012189 0.000006685 -0.000012361 0.000003205 -0.000001846 -0.000044610 0.000245248 -0.000051911 -0.000001381 -0.000038409 0.000031429 -0.000278491 0.000064874 -0.000001087 0.000037274 -0.000007968 0.000016524 0.000006866 -0.000004877 0.000000288 0.000045257 -0.000127313 0.000026470 0.000001610 0.000020478 0.000017437 -0.000050866 0.000015413 -0.000011076 0.000009510 0.000104166 -0.000622260 0.000133482 0.000001972 0.000098791 0.000055049 -0.000227974 0.000048501 -0.000009289 0.000043385 -0.000069454 0.000546109 -0.000128111 0.000007211 -0.000083300 -0.000000907 -0.000045322 0.000006493 0.000005424 0.000005443 -0.000030628 0.000078838 -0.000021549 0.000005986 -0.000016200 0.000015610 -0.000057526 0.000010803 -0.000004215 0.000011513 0.339413676 -0.001035640 0.561054797 -0.010055648 -0.009707664 0.746962808 -0.002818385 0.256144686 -0.066055738 0.303751168 -0.023612939 -0.121125016 0.007627933 -0.032100800 0.541092472 -0.002041117 0.059116777 -0.391535931 0.073697408 0.019123731 -0.005282990 -0.034727188 0.040626174 -0.089760787 0.184039559 0.000487296 -0.234306299 0.067217574 -0.124603989 0.000102833 -0.000149110 0.067556961 -0.084269866 0.045116696 0.025068260 -0.000314276 -0.123712192 0.047869605 -0.117422432 -0.005207971 0.003235905 -0.003130702 -0.003214982 -0.005322175 -0.002004368 0.004607519 0.003130914 0.002592956 0.001516635 0.012979990 0.007273651 -0.006930749 -0.002856398 0.001037937 -0.007209620 -0.005629945 0.000825163 0.000029520 0.000250174 0.000637242 -0.004021028 0.000123665 -0.000952333 0.000013024 -0.001303533 -0.003258238 -0.000275991 -0.000423871 -0.000110091 -0.000568569 0.002154847 -0.002764591 0.001046765 -0.000476353 0.000359087 0.002776375 -0.000923849 -0.000435548 -0.000886654 -0.000411061 0.002905196 0.001691726 0.001965053 0.001084114 0.002920141 -0.000506341 0.000820118 -0.000436204 0.000154987 -0.000695574 0.000142207 -0.000032269 0.000483765 0.000109045 -0.000041106 -0.000346156 0.000012070 -0.000431614 -0.000101191 -0.000930158 -0.000264903 0.000434793 -0.000321828 0.000090818 -0.000361505 -0.000344815 0.000845095 0.000070649 0.000200662 -0.000237634 -0.000914982 -0.000503098 -0.000186325 -0.000088449 0.000027695 0.000021699 -0.000033870 0.000000142 -0.000007526 0.000002129 0.000002425 0.000000655 -0.000008133 -0.000004862 -0.000001128 0.000005566 -0.000005006 0.000017683 0.000005820 0.000022404 0.000002914 -0.000018116 0.000005317 0.000001586 0.000012692 -0.000007767 0.000041555 -0.000011354 0.000004745 -0.000061835 -0.000002339 0.000011497 -0.000000862 0.000003450 -0.000017308 0.000002826 -0.000001822 -0.000011075 -0.000002976 -0.000042933 0.000009230 -0.000028613 0.000002949 -0.000002884 0.000048093 0.000005344 -0.000001686 -0.000013276 -0.000009670 -0.000029181 -0.000019080 0.000067161 -0.000020681 0.000009406 -0.000076992 -0.000005841 -0.000001586 0.000003288 -0.000001898 0.000020648 0.000000868 -0.000027675 0.000019154 -0.000002199 0.000077969 -0.000000385 -0.000026142 0.000002685 -0.000001731 0.000033221 -0.000000018 -0.000016191 0.000016603 0.000003182 0.000050302 -0.000032606 0.000073432 -0.000001522 0.000016877 -0.000029391 -0.000008860 0.000019405 0.000009140 0.000007459 -0.000003817 0.000002482 -0.000030488 0.000011046 0.000000672 0.000023296 -0.000007458 0.000039392 -0.000014740 0.000005649 -0.000059512 -0.000000583 0.000012100 -0.000000727 -0.000001323 0.000006957 0.000004799 -0.000018703 0.000009699 0.000001679 0.000018980 0.000004916 -0.000033391 0.000011144 -0.000002941 0.000035571 0.000095022 -0.000235348 0.000018422 -0.000052260 0.000147928 0.000039698 -0.000081965 -0.000015315 -0.000027157 0.000032491 0.000082329 -0.000217144 0.000006273 -0.000048454 0.000128924 0.000004405 -0.000010499 0.000005225 -0.000001295 0.000023211 -0.000003799 -0.000006191 -0.000012636 -0.000005527 -0.000020271 0.000011053 -0.000025494 0.000003001 -0.000008485 0.000022686 -0.000002543 0.000014332 -0.000003151 0.000001146 -0.000007772 -0.000006852 0.000045621 -0.000018059 -0.000000555 -0.000036338 0.000001569 -0.000009495 0.000003844 0.000000156 0.000008369 -0.000001388 0.000000357 0.000002327 0.000000466 0.000008098 -0.000002477 0.000009916 -0.000003533 -0.000001176 -0.000005970 0.000001397 -0.000006549 0.000002756 0.000000401 0.000003644 -0.000043848 0.000004445 0.000027440 -0.000001998 0.000140305 0.000008397 -0.000000030 0.000003965 0.000006640 -0.000026297 0.000003063 0.000041225 -0.000030817 0.000004941 -0.000116625 0.000052135 -0.000009156 -0.000021490 0.000006381 -0.000144305 -0.000050739 0.000038730 -0.000007519 -0.000012770 0.000073185 0.000006230 -0.000032240 0.000035052 0.000008411 0.000063469 -0.000002606 0.000005070 -0.000001440 0.000000452 -0.000002134 0.000005485 -0.000001021 0.000000261 0.000001040 -0.000013593 -0.000003155 -0.000001780 0.000000425 -0.000000993 0.000009812 -0.000000756 0.000001548 -0.000000011 -0.000000187 0.000001789 0.000007616 -0.000006725 0.000001264 0.000001768 -0.000008927 0.000008039 -0.000005687 0.000000168 -0.000001550 -0.000003078 -0.000000861 0.000002187 -0.000002520 -0.000001095 -0.000000880 0.000000434 0.000000936 -0.000000951 -0.000000370 -0.000002080 -0.000006842 0.000010256 -0.000005960 0.000001026 -0.000011006 -0.000003769 0.000008225 -0.000007662 -0.000000303 -0.000014257 -0.000001523 0.000001815 -0.000001342 0.000000339 -0.000002084 -0.000001954 0.000006112 -0.000004641 -0.000001928 -0.000004459 0.000005849 -0.000009731 0.000003846 -0.000001242 0.000010989 -0.000000803 -0.000000621 0.000002220 0.000001126 -0.000000551 -0.000009304 0.000010276 -0.000004407 0.000002844 -0.000010349 0.000004696 -0.000010707 0.000009318 0.000002070 0.000012214 0.000001581 -0.000001912 0.000001996 0.000000346 0.000000775 0.000008308 -0.000004413 0.000001665 -0.000003515 0.000001387 -0.000004955 0.000009439 -0.000005207 -0.000000291 -0.000010607 -0.000001094 0.000002918 -0.000001244 -0.000000077 -0.000002640 -0.000000920 0.000000340 -0.000000356 0.000000723 -0.000003183 -0.000002310 0.000004828 -0.000002234 -0.000000103 -0.000004788 -0.000000983 0.000002286 -0.000001551 -0.000000631 -0.000002506 0.000000035 -0.000002861 0.000002095 0.000000819 0.000003842 0.000005636 -0.000009476 0.000006591 0.000000064 0.000009086 0.000001081 0.000000540 -0.000002884 -0.000001625 0.000002340 0.000006974 -0.000008411 0.000006813 -0.000000444 0.000010052 0.000008312 -0.000007800 0.000004557 -0.000001891 0.000005042 -0.000000629 0.000001226 -0.000000841 -0.000000457 0.000000441 -0.000006151 0.000005697 -0.000002560 0.000002020 -0.000004699 -0.000001089 -0.000000866 0.000001269 0.000001183 0.000001982 -0.000001175 0.000000918 -0.000000619 -0.000000161 -0.000000300 0.000000054 0.000001315 -0.000001244 -0.000000281 -0.000002033 0.000000990 -0.000000745 0.000000879 0.000000034 0.000000929 -0.000000576 0.000000528 -0.000000128 -0.000000161 0.000000628 0.000000332 0.000001696 -0.000001890 -0.000001078 -0.000003171 -0.000131787 0.000416080 -0.000005828 0.000093140 -0.000180303 -0.000062602 0.000216879 0.000045957 0.000069395 -0.000052637 -0.000043808 0.000065341 -0.000047494 0.000000422 -0.000127399 0.000070765 -0.000347866 -0.000014951 -0.000074945 0.000107960 0.000053885 -0.000268099 -0.000076788 -0.000086590 0.000008579 -0.000041888 0.000164820 0.000050961 0.000056717 0.000018907 -0.003146644 0.008636885 -0.007704064 0.000197538 -0.170297579 0.002914059 -0.023312061 -0.028841819 -0.011488809 -0.067321836 0.001998842 0.004647826 0.000250469 0.006034164 -0.025682495 -0.000011212 0.000021849 0.000001297 -0.000000632 0.000003088 0.000044699 0.000014188 -0.000016534 0.000009984 -0.000164680 0.000020938 0.000003368 0.000008539 0.000010859 -0.000055743 -0.000021870 0.000029576 -0.000059902 -0.000027296 0.000084950 -0.000033028 -0.000042484 0.000012132 -0.000011992 0.000205031 -0.000043503 -0.000064862 0.000047876 0.000002651 0.000247914 0.000006147 0.000037491 0.000026455 0.000026074 -0.000234248 0.000070133 -0.000016962 0.000028697 0.000008859 -0.000174782 -0.000034737 0.000072645 -0.000053012 -0.000007620 -0.000065977 0.000161637 -0.000180576 0.000050647 -0.000036274 0.000184946 -0.000253244 0.000157836 -0.000087429 0.000023936 0.000186166 0.000192681 -0.000219350 0.000247218 0.000062855 0.000039114 -0.000029247 0.000085414 0.000036652 0.000018186 -0.000055103 0.000081840 -0.000113239 0.000078956 -0.000011500 -0.000023683 -0.000128050 0.000179890 -0.000194689 0.000012335 -0.000051639 -0.000063614 0.000063490 -0.000025004 0.000012210 -0.000030329 0.000061399 -0.000038435 0.000028681 -0.000004994 -0.000013959 0.000010470 0.000026789 -0.000061397 -0.000029627 -0.000037725 -0.000032636 0.000031179 -0.000008751 0.000007185 -0.000015993 0.000059372 -0.000040026 0.000018471 -0.000009520 -0.000023541 -0.000045480 0.000063879 -0.000071793 -0.000017144 -0.000021389 -0.000009906 -0.000048460 0.000048491 0.000012203 0.000077493 0.000005708 0.000026081 -0.000017794 -0.000001913 -0.000060092 0.000008769 0.000084757 -0.000065982 -0.000016263 -0.000161167 0.000002442 -0.000001086 -0.000000145 -0.000001441 0.000003706 -0.000009472 -0.000015224 0.000014276 0.000003518 0.000041761 0.000000370 -0.000039387 0.000031409 0.000009969 0.000066235 -0.000087076 -0.000040325 -0.000127006 -0.000055014 0.000060117 -0.000052886 0.000102121 -0.000057162 0.000012886 0.000077987 0.000043146 -0.000110678 0.000153797 0.000041708 0.000061766 0.000003368 -0.000027576 0.000001815 0.000003504 -0.000009166 0.000027060 0.000011479 0.000054001 -0.000004667 -0.000061741 0.000065905 -0.000099102 0.000055910 -0.000006428 -0.000060109 0.000007516 0.000019044 0.000013531 -0.000016403 -0.000004881 0.000008690 -0.000016838 -0.000008498 -0.000006158 0.000017177 -0.000020638 -0.000018899 -0.000013665 0.000018650 0.000011024 -0.000019633 0.000007363 -0.000004885 -0.000002193 0.000005284 0.000008505 -0.000011637 0.000005783 0.000001314 -0.000007878 0.000007459 0.000000020 -0.000013508 -0.000005566 -0.000013242 0.000019859 -0.000014260 0.000013778 -0.000001771 -0.000000841 -0.000014005 0.000009135 -0.000002410 0.000004115 0.000014107 -0.000057454 0.000030688 0.000003486 0.000014472 -0.000004103 0.000015200 -0.000023761 0.000005596 -0.000001455 0.000011545 0.000013455 -0.000006876 -0.000017105 -0.000009416 -0.000022531 -0.000003501 0.000005964 0.000024083 0.000008097 0.000028961 0.000004915 -0.000005037 0.000000261 -0.000002425 0.000001952 -0.000008271 0.000008886 -0.000012617 -0.000001751 -0.000002175 -0.000017990 0.000018039 -0.000018105 -0.000001988 0.000000407 0.000008454 -0.000004080 -0.000003294 -0.000003629 -0.000007382 -0.000013006 0.000009869 -0.000001453 0.000003583 -0.000005412 0.000006338 -0.000004843 -0.000000440 -0.000001087 -0.000010011 -0.000010214 0.000004280 0.000002756 0.000003029 0.000005253 0.000007764 -0.000007194 0.000004521 -0.000000135 0.000003931 0.000016775 -0.000014146 0.000007074 0.000001105 -0.000001897 -0.000000462 0.000001788 -0.000001530 -0.000000721 -0.000001925 0.000000026 0.000002310 -0.000002002 -0.000000057 -0.000000940 0.000000782 0.000004262 -0.000002511 -0.000000388 -0.000010335 0.000000601 -0.000002613 0.000002524 0.000001101 0.000002245 -0.000000588 -0.000000667 0.000001278 0.000000524 -0.000000230 0.000000710 0.000003824 -0.000002728 -0.000000392 -0.000006816 0.000000509 0.000003326 -0.000003154 -0.000000497 -0.000001139 0.000002176 0.000003093 -0.000002484 -0.000000572 -0.000009756 0.000000448 0.000002968 -0.000001543 0.000000503 -0.000005640 -0.000512335 -0.000063373 0.000091812 -0.000040565 0.000069349 0.000040124 -0.000080068 0.000028423 -0.000028365 0.000028714 -0.000582559 0.000080951 -0.000076039 0.000022447 -0.000073922 0.000046131 0.000025085 -0.000044779 0.000008754 -0.000041137 0.000018962 0.000043196 -0.000036861 0.000018048 -0.000023767 0.000100577 -0.000038583 0.000053911 -0.000013158 0.000047848 -0.000032571 -0.000011776 0.000004553 -0.000007156 0.000001883 -0.000026946 -0.000001278 -0.000008775 -0.000003814 -0.000005481 0.000045952 0.000043261 -0.000050233 0.000015325 -0.000050880 -0.000037719 0.000041848 -0.000027868 0.000014732 -0.000027419 -0.000093533 0.000036375 -0.000016010 0.000012440 -0.000016807 0.000012607 -0.000075242 0.000062894 -0.000028123 0.000061602 0.000066662 -0.000002193 -0.000001484 0.000000579 0.000003047 0.000040578 -0.000030629 0.000004372 -0.000012260 0.000002759 -0.000036523 0.000001119 -0.000005746 0.000000794 -0.000005029 -0.000056376 0.000019366 -0.000007569 0.000006565 -0.000008713 -0.000002493 0.000033624 -0.000009886 0.000021427 -0.000010628 0.000119558 -0.000042285 0.000026583 -0.000015342 0.000023827 0.000029441 -0.000000151 0.000029956 0.000003954 0.000029452 0.000014258 -0.000021396 0.000004832 -0.000009755 0.000004824 0.000027293 0.000012056 0.000020322 0.000007874 0.000020739 -0.000005289 -0.000005113 0.000004254 0.000001196 0.000007298 0.000002438 0.000001213 -0.000004277 -0.000001572 -0.000004033 0.000006648 -0.000005246 0.000010218 0.000000565 0.000013743 0.000115770 -0.000116191 0.000074183 -0.000033976 0.000082076 0.000062576 -0.000074508 0.000054667 -0.000021259 0.000078107 -0.000125119 0.000113649 -0.000058904 0.000047715 -0.000054353 0.000008425 -0.000001224 0.000002002 0.000002284 0.000002378 0.000000379 0.000002428 -0.000000395 0.000002187 0.000001096 0.000001812 -0.000004350 0.000002693 -0.000001074 0.000001578 -0.000000325 -0.000011100 0.000004522 -0.000005143 0.000000709 -0.000029246 0.000006407 -0.000006188 0.000001785 -0.000006704 -0.000047061 0.000014928 -0.000013926 0.000005000 -0.000013421 -0.000498941 -0.002314332 0.004358288 0.001203720 -0.030118820 -0.000929411 -0.002159617 -0.001170271 -0.000168020 -0.023964440 -0.000348883 -0.000602714 0.000644530 -0.000294428 -0.007171158 -0.000357212 0.000275638 -0.000059407 -0.000662284 -0.002658365 -0.000025672 0.000704714 -0.000296956 -0.000537502 0.002053870 0.000050795 -0.000867708 -0.000432476 -0.000125716 0.002608511 -0.000013607 -0.000899807 0.001088990 -0.000013097 -0.000826984 0.000191389 -0.001012270 0.000599668 0.000471587 0.000310733 0.000133468 -0.000211382 -0.000124007 0.000171285 0.000443117 0.000160957 0.000681354 -0.001182332 0.000022258 0.001370903 0.000129725 -0.000098580 -0.000712788 -0.000223894 0.002941561 -0.000222230 -0.001232512 -0.001015867 -0.000689323 0.002748068 0.000245656 -0.003773857 -0.001123641 -0.001695917 0.011173990 0.000189025 -0.002179255 0.003206530 -0.001112022 -0.002951527 0.000164663 -0.000473826 0.001427234 -0.000025594 0.000524633 0.000061123 0.000120666 -0.000109170 -0.000050926 0.000913883 -0.000029936 -0.000974865 0.000062122 0.000384584 -0.001015491 0.000001731 0.000942034 -0.000158730 0.000397891 -0.000795504 -0.000043425 -0.000032057 0.000023883 -0.000075694 -0.000470682 -0.000059519 -0.000013037 0.000022961 -0.000037499 -0.000689616 -0.000020798 0.000020478 -0.000010166 -0.000072315 -0.000234684 -0.000098025 0.001134621 -0.000541810 -0.000096126 -0.000491751 -0.000124118 0.000931894 -0.000658237 -0.000113697 -0.000349296 0.000044218 0.000321430 -0.000028045 0.000000965 0.000201781 0.000004572 -0.000180003 -0.000092168 -0.000090376 0.000499345 0.000004621 -0.000177409 -0.000040638 -0.000097087 0.000611260 -0.000004011 0.000024064 -0.000009666 -0.000036501 -0.000143297 0.000169439 0.000189258 0.000218227 0.000034524 0.000174681 -0.000073695 -0.000272115 -0.000566408 0.000031687 0.000988054 0.000066394 0.000192223 0.000306243 0.000247529 -0.000803316 -0.000056897 0.000055882 -0.000032588 0.000014721 -0.000032941 -0.000002349 0.000003200 -0.000005869 -0.000000657 -0.000016973 0.000063550 -0.000057904 0.000025185 -0.000026697 0.000018337 -0.000059738 0.000059790 -0.000039640 0.000013348 -0.000050829 -0.000048304 0.000052613 -0.000040344 0.000013806 -0.000054157 0.000037200 -0.000027159 0.000010166 -0.000013552 0.000007549 0.000022862 -0.000221665 -0.000002645 -0.000032175 0.000365674 0.000055199 -0.000456818 0.000276107 0.000056057 0.000087519 -0.000002236 -0.000194467 0.000162665 0.000059745 -0.000213113 0.000048924 -0.000568624 0.000300374 0.000003234 0.000380158 0.000020434 -0.000210780 0.000053254 -0.000018252 0.000172509 -0.000030678 0.000149127 -0.000121151 -0.000015455 -0.000155217 0.001426119 -0.000012026 0.000065597 -0.000004020 0.000054773 0.002060052 0.000109658 0.000310689 0.000122876 0.000432636 0.002325741 -0.000231015 -0.000369736 -0.000141303 -0.000216393 -0.005667940 0.000342849 0.000251558 0.000374431 0.000129632 -0.006121245 0.000478871 -0.000059209 0.000178030 -0.000335253 0.005614228 -0.000024222 0.000506215 0.000117733 0.000241377 0.000716726 -0.000068814 -0.000111725 -0.000020298 -0.000045553 0.000374817 -0.000071623 -0.000109874 -0.000039489 -0.000071988 0.000094555 0.000047833 0.000096143 0.000043946 0.000093967 0.000434924 -0.000050755 -0.000055888 -0.000041108 -0.000019993 -0.000594700 0.000026386 0.000034983 -0.000004674 0.000003341 0.000687989 -0.000101433 -0.000142665 -0.000050442 -0.000086958 0.000146504 -0.000013023 0.000020902 -0.000003238 0.000021884 0.000173692 -0.000008588 0.000001388 -0.000001564 0.000009222 0.000072073 -0.000011928 0.000003903 -0.000003359 0.000009789 0.000044185 -0.000017798 0.000004674 -0.000010650 0.000009253 -0.000020179 -0.000003184 -0.000000487 -0.000000257 -0.000000677 -0.000029308 -0.000000226 -0.000013405 -0.000000571 -0.000004704 0.003014667 -0.000210847 -0.000345938 -0.000151233 -0.000278003 0.000299486 -0.000158751 -0.000275815 -0.000166814 -0.000151809 -0.001268589 0.000060788 0.000172115 -0.000006794 0.000053843 -0.001174814 0.000120642 0.000124070 0.000053984 0.000065945 0.000192827 -0.000020343 0.000059654 -0.000013332 0.000023847 -0.000383519 0.000034613 -0.000047675 0.000016950 0.000030605 0.000784963 -0.000005718 -0.000086904 0.000013708 -0.000119775 -0.000118862 0.000056890 -0.000011528 0.000084957 -0.000096890 -0.000170374 -0.000086112 -0.000122461 -0.000055414 -0.000055799 0.000007867 -0.000025445 0.000009037 -0.000026262 0.000002030 0.000175546 0.000016889 0.000029794 0.000013764 0.000022110 0.000027393 0.000027815 0.000006198 0.000020939 0.000004804 -0.027771027 -0.023418390 -0.017559869 -0.019861790 -0.008107999 0.037208456 -0.001166162 0.056392803 -0.004211167 0.031027054 -0.085082830 -0.019437780 -0.011678377 -0.004942794 -0.003076664 -0.001302054 -0.195321439 -0.069621031 -0.070137884 0.031558304 0.023028487 -0.098512920 -0.181895532 -0.051336794 -0.000108944 0.005026392 -0.073200152 -0.038046777 -0.110032639 0.015138036 0.003945125 -0.003442357 -0.003257701 -0.005585260 -0.004924444 -0.016582501 -0.004516826 -0.018668739 -0.001140458 -0.013938514 0.007292972 -0.005539077 -0.001049806 0.001199700 -0.002775900 -0.006621762 -0.005711453 -0.013183481 -0.002051330 -0.008175689 0.000140170 0.006765622 0.014879634 0.003110619 0.010236378 0.000310199 -0.003988541 -0.010143699 -0.002333691 -0.006373018 0.001047619 -0.000329233 0.000730163 -0.000295747 0.000122280 -0.000228611 -0.000895246 0.000561536 -0.000525454 -0.000107036 -0.001822627 -0.000463560 0.000456485 -0.000209319 0.000082378 0.000062200 -0.000216723 -0.000072968 0.000433934 0.000018572 -0.000798378 0.000054381 0.000367244 0.000003075 0.000207860 0.000207154 0.000223516 -0.000358674 -0.000544663 -0.000202337 -0.005589740 0.005428723 -0.030245657 0.002317229 -0.004519373 -0.002535291 -0.014360339 -0.063211764 -0.004749073 -0.017889874 0.001122726 0.001490936 -0.015284188 0.006700509 -0.005515898 0.002223580 0.010550450 0.023309868 0.001201851 0.011733422 0.000593225 0.005950377 0.003566788 0.003515792 0.003151588 0.000984214 0.003957389 0.017369038 0.006840247 0.008673596 -0.000159718 -0.000373728 -0.001623737 0.002074312 -0.000125464 0.000813001 0.001808069 0.001144440 0.000858689 -0.000286766 -0.000040211 0.001560605 -0.001159159 -0.001909676 0.000109476 0.000470500 0.000582679 -0.000367474 0.000222829 -0.000191121 -0.000023870 0.000617227 -0.000593035 0.000426644 -0.000203543 -0.000443924 0.000285666 -0.000422164 0.000408536 0.000160369 0.000002914 -0.000002303 0.000000944 0.000001939 0.000000937 0.000002337 -0.000021975 0.000011324 -0.000000880 0.000029072 -0.000000386 0.000010312 -0.000011371 -0.000003201 -0.000020855 -0.000000869 0.000004706 -0.000002907 -0.000001037 -0.000006229 -0.000003252 0.000016063 -0.000005610 -0.000000131 -0.000013425 0.000001362 -0.000007601 0.000003190 0.000000250 0.000005733 0.000001046 -0.000005192 0.000005203 0.000001038 0.000008686 -0.000000812 -0.000000854 0.000001552 0.000001307 0.000003061 -0.000001070 0.000008767 -0.000004152 -0.000001333 -0.000008118 -0.000005014 0.000012365 -0.000003599 -0.000002455 -0.000010134 0.000000969 -0.000001775 -0.000001396 -0.000000868 -0.000000220 -0.000000831 -0.000005867 0.000003094 0.000000699 0.000006590 0.000007680 -0.000015920 0.000015159 -0.000001396 0.000012501 -0.000004137 -0.000006914 0.000014358 -0.000005373 0.000033820 0.000009406 -0.000015403 -0.000006997 -0.000001801 -0.000012132 -0.000008979 0.000020777 -0.000021770 -0.000002804 -0.000000010 0.000010614 -0.000039420 0.000010816 0.000001340 0.000033676 -0.000008164 -0.000009293 -0.000004167 -0.000001723 0.000009017 0.000011788 -0.000026534 -0.000017770 -0.000010352 -0.000014605 -0.000005614 0.000001698 -0.000022520 -0.000005551 -0.000013827 -0.000005444 0.000009833 0.000020537 0.000005273 0.000040841 0.000001123 0.000009476 0.000000828 0.000003725 -0.000031406 -0.000000116 0.000031003 -0.000000973 0.000002658 -0.000035563 0.000001275 -0.000024416 0.000006776 -0.000003638 0.000020064 0.756043469 -0.051798173 0.266723558 0.000367559 -0.003113020 0.243502820 -0.005070358 0.015579384 -0.072462365 0.087362460 -0.001715162 0.002863599 0.137584546 -0.049519977 0.113371961 0.034162077 -0.009091349 -0.000109159 0.001300480 0.000012482 -0.032633939 0.012035132 0.000299264 -0.001531980 0.000427325 0.032634327 -0.001868676 -0.000114770 0.001598318 -0.000527895 0.000737071 -0.000251054 -0.000008980 0.000047976 0.000118402 0.001769270 -0.000848342 0.000004045 0.000027797 0.000044004 0.001640943 -0.000068858 -0.000016825 0.000181558 -0.000132136 0.006850003 -0.000693561 -0.000069782 0.000672183 -0.000437688 0.001435338 0.000561697 -0.000187322 0.000504036 -0.000225792 -0.009326133 0.003489115 0.000317821 -0.001047689 0.000293790 -0.001613487 0.000124631 0.000085845 -0.000305113 0.000170200 0.000283352 -0.000423108 0.000047014 -0.000060356 -0.000039686 0.000284073 -0.000323935 -0.000056666 0.000068075 -0.000026693 -0.000789749 -0.000017168 0.000009718 -0.000108307 0.000066121 -0.002301742 0.000085392 0.000114283 -0.000325467 0.000090680 0.002210526 -0.000589059 -0.000062923 0.000226582 -0.000064271 0.000067679 0.000002191 -0.000005233 0.000013651 -0.000009900 0.000007702 0.000004273 -0.000003414 0.000003692 0.000003076 -0.000032803 0.000011514 0.000002488 -0.000000701 -0.000001265 0.000008562 0.000003855 -0.000000819 0.000006925 -0.000000590 -0.000010268 -0.000005999 0.000000530 -0.000014843 0.000002777 -0.000006995 -0.000002138 0.000000726 -0.000004576 0.000000344 0.000041352 -0.000002633 -0.000002107 0.000001446 -0.000007763 0.000026299 -0.000009973 -0.000000994 0.000012520 -0.000004873 0.000038636 -0.000021640 -0.000004135 0.000002787 -0.000005826 -0.000051166 -0.000016191 0.000006676 -0.000025238 -0.000003981 -0.000022495 0.000012826 -0.000000009 0.000001614 0.000005748 -0.000034832 0.000025402 -0.000001725 0.000012324 0.000013239 0.000030038 -0.000000117 -0.000000848 0.000010083 -0.000002617 -0.000019337 0.000012670 0.000002849 0.000003260 0.000001694 -0.000132202 0.000004969 0.000009931 -0.000030793 0.000014000 -0.000054901 0.000000354 0.000002360 -0.000008245 0.000010916 0.000014322 0.000014557 0.000000152 0.000010707 -0.000001972 -0.000010717 -0.000015407 0.000002385 -0.000014678 -0.000002930 -0.000023710 0.000000485 0.000000668 -0.000004432 0.000003807 0.000007415 0.000007454 -0.000000385 0.000006608 -0.000001091 0.000011141 0.000014822 -0.000002476 0.000011645 0.000004068 0.000332059 0.000038736 -0.000030248 0.000097480 -0.000022871 0.000157970 0.000002165 -0.000015247 0.000039747 -0.000011744 0.000354419 0.000012416 -0.000027720 0.000089842 -0.000028289 0.000001874 -0.000000540 0.000000581 0.000002835 -0.000000537 0.000050915 -0.000014893 -0.000004866 0.000006272 -0.000001787 0.000037239 -0.000003238 -0.000003317 0.000010213 -0.000002218 -0.000011093 -0.000002026 0.000001294 -0.000005350 0.000000144 -0.000015884 -0.000019659 0.000001788 -0.000015561 0.000000806 0.000004059 0.000002196 -0.000000363 0.000003524 -0.000000593 -0.000011095 0.000001674 0.000000516 -0.000000432 0.000001680 -0.000007312 -0.000003088 -0.000000236 -0.000003363 0.000002872 0.000003810 0.000004561 -0.000000644 0.000002966 0.000000377 -0.000132411 0.000024057 0.000002185 0.000001469 0.000046317 0.000007396 -0.000004099 0.000003281 -0.000004100 -0.000013479 0.000042991 -0.000028635 0.000002041 -0.000017348 -0.000018667 0.000124552 -0.000017580 -0.000000526 -0.000001749 -0.000054385 -0.000086164 -0.000000665 -0.000003369 -0.000005936 0.000052188 -0.000047359 0.000020393 0.000004202 0.000006581 -0.000002197 -0.000004245 -0.000000703 0.000000275 -0.000001319 0.000001413 0.000005217 -0.000002905 0.000000773 -0.000001869 -0.000006209 -0.000002004 0.000002111 -0.000000486 0.000001777 0.000003682 -0.000004713 0.000000279 0.000000134 -0.000000725 0.000000952 0.000014300 0.000001418 0.000000335 0.000001726 -0.000007708 0.000014673 0.000001944 -0.000001598 0.000002483 -0.000002946 0.000002292 -0.000000309 -0.000000639 0.000000175 0.000001550 -0.000000555 -0.000000360 0.000000123 -0.000000649 -0.000000138 -0.000002785 -0.000006047 0.000000926 -0.000003523 0.000001388 0.000007420 -0.000005957 -0.000000225 -0.000001968 0.000000473 -0.000001094 -0.000000814 0.000000413 -0.000000661 0.000000115 0.000000975 -0.000001728 -0.000001007 -0.000000931 0.000002955 0.000005649 0.000005234 -0.000001053 0.000004112 -0.000000622 -0.000003150 -0.000000298 0.000000935 -0.000000873 -0.000001290 -0.000007365 -0.000006343 0.000002053 -0.000004304 0.000000592 -0.000006403 0.000005747 0.000000807 0.000002286 -0.000003228 -0.000001820 0.000000315 0.000000416 -0.000000263 -0.000001127 0.000005183 0.000003521 -0.000002059 0.000001603 -0.000000350 -0.000001670 -0.000006099 0.000000215 -0.000003532 0.000001618 -0.000001064 -0.000001650 0.000000122 -0.000001238 0.000000542 0.000000463 -0.000001664 0.000000639 -0.000000808 -0.000001068 -0.000001132 -0.000002540 0.000000163 -0.000001773 0.000000912 0.000000457 -0.000001470 -0.000000288 -0.000000659 0.000000811 -0.000001190 0.000001608 0.000000446 0.000000836 -0.000000558 -0.000001993 0.000004607 -0.000000024 0.000002234 -0.000002247 0.000004907 0.000001353 -0.000001319 0.000001728 0.000001969 -0.000001744 0.000005868 -0.000000689 0.000002421 -0.000001356 0.000002443 0.000004502 -0.000001121 0.000002056 -0.000001778 0.000001003 -0.000000088 -0.000000544 0.000000275 0.000001077 -0.000003728 -0.000003704 0.000001302 -0.000002119 0.000000543 -0.000001901 0.000000531 0.000000625 0.000000174 -0.000000386 -0.000000179 -0.000000582 -0.000000098 -0.000000074 0.000000652 0.000001254 -0.000000714 -0.000000265 -0.000000208 0.000000171 -0.000000455 0.000000577 -0.000000105 0.000000168 -0.000000242 0.000000276 -0.000000157 -0.000000325 0.000000225 0.000000634 0.000001813 -0.000001216 -0.000000373 -0.000000601 0.000000403 -0.000812068 0.000020621 0.000052689 -0.000168016 0.000055542 -0.000516426 0.000031858 0.000036665 -0.000098895 0.000025404 0.000094189 -0.000063767 0.000005360 -0.000024731 -0.000001885 0.000827789 -0.000073233 -0.000045052 0.000138416 -0.000051836 0.000732233 -0.000083965 -0.000044453 0.000119525 -0.000040073 -0.000512558 0.000061107 0.000027288 -0.000074885 0.000027670 -0.068046339 -0.031028632 -0.001408108 0.001489406 0.002370156 -0.162766142 -0.026340439 -0.000816485 0.001178059 -0.000793807 -0.023540019 -0.081464421 0.002392703 0.000185070 -0.003529851 -0.000043998 -0.000011384 0.000002146 -0.000010467 0.000011764 0.000048618 -0.000039171 0.000006204 -0.000021632 -0.000054812 0.000000556 -0.000017484 0.000004332 -0.000012183 -0.000021639 0.000114370 0.000034994 -0.000024744 0.000035311 0.000051653 0.000044174 0.000064841 -0.000014394 0.000052033 0.000053978 -0.000035287 0.000074275 -0.000004946 0.000049673 0.000049537 -0.000136879 -0.000095186 0.000033827 -0.000077646 -0.000066563 -0.000071208 -0.000047872 0.000018523 -0.000045822 -0.000068973 0.000019438 -0.000034368 -0.000001075 -0.000020860 0.000015868 0.000155015 0.000123774 -0.000038151 0.000088588 -0.000013783 0.000012236 -0.000005078 -0.000011633 0.000019644 0.000125702 -0.000198191 0.000046558 0.000022268 0.000008049 -0.000123498 -0.000083266 -0.000101240 0.000013240 -0.000030106 0.000014279 -0.000016552 0.000012897 -0.000006883 0.000003532 -0.000097121 0.000155185 -0.000075777 -0.000000823 -0.000024630 0.000120507 -0.000035541 -0.000037668 0.000007017 -0.000020784 0.000015064 -0.000003738 0.000013302 0.000002344 -0.000002709 -0.000026232 0.000064597 0.000038456 -0.000007379 0.000006454 0.000024035 -0.000021026 -0.000016553 0.000004500 -0.000011469 0.000005599 0.000010909 0.000006866 -0.000000165 -0.000000514 -0.000023771 0.000049862 -0.000012011 -0.000005620 -0.000005444 0.000036096 -0.000058302 0.000018101 0.000008771 0.000008856 -0.000001708 0.000000447 -0.000018652 0.000001269 -0.000014853 -0.000007792 0.000031492 -0.000050151 -0.000004069 -0.000035249 -0.000004387 0.000006265 0.000001918 -0.000001675 0.000002092 0.000001278 -0.000009401 0.000010082 0.000000145 0.000009143 0.000006427 -0.000016136 0.000021427 0.000002091 0.000015519 -0.000002484 0.000115385 0.000113533 -0.000019612 0.000039217 -0.000023569 -0.000006863 0.000057161 0.000012058 -0.000016343 0.000059745 -0.000034234 0.000071183 -0.000001845 0.000003718 -0.000007664 -0.000020447 0.000020635 -0.000006464 -0.000002014 -0.000030484 -0.000057543 -0.000024664 0.000005664 -0.000009068 0.000007052 -0.000093083 0.000019535 0.000003333 -0.000005289 -0.000030090 -0.000011666 -0.000038111 0.000007040 -0.000008197 0.000037111 0.000034181 -0.000002716 -0.000000566 0.000015076 0.000005847 0.000013485 0.000029232 -0.000004326 0.000013489 -0.000030021 0.000001682 -0.000000292 -0.000000749 -0.000000032 0.000007080 -0.000001608 -0.000001007 0.000000033 0.000002332 -0.000008955 0.000019662 0.000004653 -0.000002459 0.000003774 0.000000590 -0.000002632 0.000002944 0.000000879 -0.000000615 -0.000006567 -0.000005461 0.000000249 -0.000000707 -0.000000728 0.000004693 -0.000042966 -0.000020327 0.000005398 -0.000012331 0.000007227 0.000026342 -0.000006098 -0.000002458 0.000008995 -0.000004793 0.000022788 -0.000002837 -0.000003642 0.000005523 -0.000002771 -0.000038436 0.000004845 0.000004192 -0.000006443 0.000003418 0.000002940 0.000002726 -0.000000271 0.000001432 -0.000000047 0.000005277 -0.000001094 -0.000000089 -0.000001204 0.000004829 0.000009590 -0.000003478 -0.000001271 -0.000000440 0.000010713 0.000003449 0.000000318 -0.000000050 -0.000001531 -0.000002255 -0.000008101 -0.000005656 0.000001639 -0.000002429 0.000001883 -0.000004670 -0.000001575 0.000002413 -0.000002849 -0.000003847 -0.000005232 -0.000001764 0.000000734 0.000001047 0.000002984 0.000003567 0.000004920 -0.000001110 0.000003241 -0.000002590 0.000000832 0.000005986 -0.000000111 0.000001498 -0.000009502 0.000000936 -0.000000553 -0.000000202 -0.000000443 0.000000624 0.000002435 0.000000061 -0.000000705 0.000000249 0.000000387 -0.000000779 -0.000003139 0.000000362 -0.000002723 -0.000001229 -0.000002343 0.000000691 0.000000559 0.000000291 -0.000001196 -0.000002708 -0.000000439 0.000000573 -0.000000477 -0.000000548 0.000001303 -0.000002006 -0.000000215 -0.000001439 -0.000000400 0.000004696 0.000000197 -0.000001193 0.000000495 0.000000839 0.000000838 -0.000002575 0.000000229 -0.000002263 -0.000001779 0.000000302 -0.000001365 -0.000000020 -0.000001108 -0.000001062 -0.000072891 0.000097956 -0.000003971 0.000008268 -0.000012663 -0.000010070 0.000054060 -0.000009915 0.000012654 -0.000012205 0.000052508 -0.000064276 0.000013804 -0.000014615 0.000012291 0.000056517 -0.000037497 0.000001382 -0.000002233 0.000004178 -0.000012386 -0.000054348 0.000006453 -0.000011541 0.000009011 -0.000076483 0.000075334 -0.000004510 0.000003550 -0.000007311 0.000013526 0.000018250 -0.000001162 0.000004099 -0.000001665 0.000026205 -0.000005872 0.000000276 0.000002521 0.000000476 0.000030310 -0.000053228 0.000004315 -0.000009095 0.000008401 -0.000003039 -0.000028020 0.000006638 -0.000009427 0.000007622 -0.000009537 -0.000012609 0.000006509 -0.000008069 0.000006529 -0.000013772 0.000068325 -0.000010445 0.000016795 -0.000013656 0.000000047 -0.000005012 -0.000001899 0.000000481 0.000000525 0.000021515 0.000003694 -0.000004424 0.000006396 -0.000006154 0.000013802 -0.000005260 0.000001441 0.000000681 -0.000000671 0.000004431 0.000004102 0.000002016 -0.000002472 0.000003810 -0.000005357 -0.000021364 0.000002340 -0.000005161 0.000005085 -0.000010548 0.000021473 -0.000008229 0.000007050 -0.000007423 -0.000086445 0.000025753 0.000002504 -0.000006493 0.000000245 0.000019192 0.000010215 -0.000003501 0.000006635 -0.000003043 -0.000082713 0.000020195 0.000003346 -0.000008569 0.000002824 0.000000629 0.000001436 0.000000254 0.000001517 -0.000001200 0.000008461 -0.000001624 -0.000000879 0.000000672 0.000000850 -0.000020465 0.000007739 0.000000213 0.000000266 -0.000000303 0.000023255 0.000074030 -0.000018293 0.000030552 -0.000022679 0.000005298 0.000062102 -0.000015214 0.000026165 -0.000007375 -0.000050339 -0.000069156 0.000021795 -0.000027980 0.000022362 -0.000001202 -0.000001177 0.000000196 0.000000367 -0.000001124 0.000000044 -0.000001197 -0.000000334 0.000000380 0.000000518 -0.000002051 0.000001475 0.000000307 0.000000160 -0.000001296 -0.000001849 0.000005103 0.000000108 0.000000653 -0.000002536 0.000006852 -0.000005780 0.000000544 -0.000000765 0.000000646 0.000009354 -0.000013049 0.000003151 -0.000002166 0.000002134 -0.008267465 0.004133953 -0.000097191 0.000026479 0.000084887 0.007221075 0.005162100 -0.000743025 -0.000092319 0.000985975 -0.000600638 0.007529044 0.000178073 -0.000151368 0.000518096 0.002317903 0.002992404 0.000075368 -0.000362394 0.000150602 0.003087535 -0.002203725 0.000248390 -0.000285743 -0.000454792 -0.003699612 0.004195993 -0.000012675 -0.000201040 -0.000210436 -0.000048035 0.000445528 0.000077414 -0.000106920 -0.000069238 -0.001327432 0.000107315 -0.000155479 0.000306259 0.000158967 -0.000416612 -0.000030709 -0.000136148 0.000218016 0.000091371 0.002369810 0.002763346 -0.000306352 0.000310666 0.000245260 -0.000525385 -0.003950458 0.000075982 0.000114130 -0.000171833 -0.004383721 0.004172845 -0.000001791 0.000019851 -0.000020131 -0.021165498 -0.010235922 0.000450759 -0.000095184 -0.000331164 -0.023442648 -0.013083803 0.000652502 -0.000475383 -0.000590074 -0.006701406 0.003473602 0.000176281 -0.000195572 0.000069805 0.002017458 0.000063682 -0.000204428 -0.000307581 0.000480079 -0.000938194 0.001426096 -0.000252689 -0.000243824 0.000190386 0.002061874 -0.002559005 0.000164755 0.000509217 -0.000384805 0.000479711 0.000196954 0.000016568 -0.000000240 0.000018494 0.000422253 0.000330453 -0.000027697 -0.000020691 0.000050337 0.000250186 -0.000090945 0.000058257 0.000024747 -0.000005156 0.000457475 -0.000587258 0.000040999 -0.000243624 -0.000043368 -0.000183961 0.000103824 0.000027040 -0.000234610 -0.000037982 0.000418820 -0.001104263 -0.000030629 0.000023847 0.000021123 -0.000615425 -0.000422597 0.000017252 -0.000006970 -0.000020810 -0.000431035 -0.000110446 0.000024269 -0.000001768 0.000000820 0.000079729 -0.000170187 -0.000015923 -0.000002039 -0.000025576 -0.000102695 -0.000592699 0.000014286 -0.000003862 -0.000020998 0.000607267 0.001948840 -0.000011895 0.000037194 -0.000024872 0.002088279 -0.002986802 0.000049491 0.000056758 -0.000082110 -0.000016029 -0.000030813 0.000007586 -0.000013668 0.000013097 0.000004736 -0.000007891 0.000002571 -0.000004427 -0.000003071 0.000036752 0.000031647 -0.000011191 0.000013531 -0.000012410 -0.000008349 -0.000038258 0.000009062 -0.000017341 0.000010690 0.000001449 -0.000041802 0.000010475 -0.000017178 0.000006228 0.000021479 0.000013682 -0.000006479 0.000007047 -0.000005290 0.000037388 0.000026740 -0.000003091 0.000061948 -0.000011906 0.000145222 0.000121231 -0.000014323 0.000148818 -0.000015128 -0.000024288 0.000166234 0.000015018 0.000031415 -0.000024464 -0.000263088 0.000174731 -0.000016332 0.000111201 0.000026735 0.000267407 0.000127463 -0.000001472 0.000077641 -0.000012878 0.000198462 0.000116787 0.000013869 -0.000038973 -0.000021151 -0.000255978 -0.000212368 -0.000002151 0.000014235 0.000011403 -0.000129115 -0.000138382 0.000002954 -0.000003725 0.000009574 0.000468072 -0.000005484 -0.000010469 0.000003024 0.000014057 -0.000483595 -0.000553324 0.000014555 -0.000009996 0.000021849 0.000452318 0.000092493 0.000001974 -0.000011009 0.000009877 -0.001134981 -0.000741140 -0.000061042 0.000053916 0.000059106 0.000027466 -0.000097806 -0.000007571 -0.000002217 0.000000033 0.000118874 -0.000008380 -0.000004261 -0.000001458 0.000000568 -0.000142279 -0.000053261 0.000003209 -0.000000133 0.000002219 0.000076967 -0.000028345 -0.000003834 0.000004308 0.000001555 -0.000010706 0.000024531 0.000002837 -0.000000159 0.000000346 0.000090226 -0.000058183 -0.000008578 -0.000000407 -0.000000537 -0.000037102 -0.000015452 -0.000002579 0.000003033 -0.000000910 0.000004399 -0.000009576 -0.000000509 -0.000000226 0.000001608 0.000009376 0.000005582 -0.000002138 0.000001701 -0.000001203 0.000003432 0.000005916 -0.000003892 0.000002456 -0.000002007 -0.000001636 -0.000001741 -0.000001457 0.000000963 0.000000144 0.000009820 -0.000008154 -0.000001469 -0.000000525 -0.000000048 0.000276641 -0.000155934 -0.000018775 0.000005196 0.000002813 0.000190033 0.000066636 0.000007222 0.000004532 0.000001926 -0.000128389 0.000096661 0.000028590 0.000000312 0.000007764 -0.000080602 0.000046624 0.000016018 -0.000000479 0.000000088 -0.000027411 0.000064554 0.000013225 0.000002154 -0.000002431 0.000076806 -0.000054162 0.000000701 -0.000005253 -0.000006364 0.000016448 -0.000079788 0.000017377 -0.000007187 -0.000006090 -0.000059887 -0.000044644 -0.000006454 -0.000008627 -0.000008993 0.000100241 -0.000118543 -0.000029971 0.000000838 -0.000006967 0.000000499 0.000005408 -0.000003318 0.000001595 0.000001278 -0.000035912 -0.000000950 -0.000004264 0.000002348 0.000000330 -0.000020059 -0.000005118 0.000000648 -0.000001417 0.000001100 0.012307238 -0.003844621 0.000243331 -0.002136543 -0.002372038 -0.034299359 0.020370879 -0.003365804 -0.002776455 -0.001997709 0.008764234 -0.006737345 -0.002191477 -0.000736567 0.003326843 -0.034375392 0.015598364 -0.011015351 -0.016765693 -0.008557991 -0.060867503 0.006383021 0.008808956 0.009492589 0.003608054 -0.015564602 0.016525327 -0.009841820 -0.010513302 -0.001693486 0.005066060 -0.002535853 -0.000621557 -0.000741975 -0.000125049 0.013546638 -0.009173824 0.000769844 0.000400843 0.000578475 0.003374231 -0.002284722 -0.000494453 -0.000644033 -0.000188989 0.009277398 -0.005957304 0.000000396 -0.000181212 0.000279077 -0.011639441 0.006588870 0.000036881 0.000257079 -0.000219199 0.007126786 -0.004257494 0.000108308 -0.000128254 0.000077171 -0.000128233 0.000151734 -0.000089343 -0.000137326 -0.000159609 0.000164185 -0.000099213 -0.000240888 -0.000226727 -0.000115300 0.000043675 -0.000187541 -0.000223344 -0.000130005 0.000101366 0.000036758 -0.000069655 0.000034611 0.000038454 -0.000016708 -0.000187285 0.000128987 -0.000040376 -0.000023116 -0.000023235 0.000163572 -0.000022454 0.000007415 0.000030786 0.000051219 0.000616434 -0.005926377 -0.000213310 -0.001456159 0.001992247 0.022259361 -0.011715586 0.001749782 0.000929875 0.001167908 -0.000302632 0.002208068 0.001649205 -0.001315209 -0.001931796 -0.014620099 0.007961107 0.000182945 0.000396680 -0.000162650 -0.005050296 0.002670637 -0.000159696 0.000119865 -0.000240415 -0.010389572 0.005444066 0.000118378 0.000311877 -0.000187984 0.000465597 -0.000027172 0.000237369 0.000407368 -0.000054958 0.000176299 -0.000260004 -0.000994904 -0.000651422 -0.000512511 0.000031994 0.000107163 0.000140302 0.000357193 0.000230972 -0.000285748 0.000336869 0.000043006 0.000011051 -0.000114357 -0.000260897 -0.000117291 -0.000036599 0.000023480 -0.000022134 -0.000258241 -0.000376139 -0.000081337 0.000023709 0.000114555 0.000010880 0.000003790 -0.000000433 0.000003563 -0.000002335 0.000006803 0.000010968 -0.000001334 0.000008929 0.000002627 -0.000001966 -0.000004082 -0.000001049 -0.000003438 0.000001148 -0.000000188 -0.000002537 -0.000000426 -0.000001311 0.000001309 -0.000013118 -0.000009129 0.000000943 -0.000007572 0.000000547 0.000003928 0.000003374 -0.000000100 0.000002689 -0.000000615 -0.000002382 0.000001384 0.000000511 0.000000821 -0.000000725 -0.000000871 0.000001257 0.000000584 0.000000721 -0.000000642 -0.000003205 -0.000004876 -0.000000475 -0.000003422 0.000001666 -0.000016703 -0.000010279 0.000000647 -0.000008002 0.000004027 0.000006939 0.000002012 -0.000000893 0.000002280 0.000000801 0.000002614 0.000003533 0.000000317 0.000002863 0.000000107 -0.000008798 -0.000002325 0.000001152 0.000001833 -0.000004689 -0.000006720 -0.000009241 0.000000188 0.000000001 0.000011353 0.000006048 0.000003286 -0.000001090 -0.000000070 -0.000008605 0.000013686 0.000003738 -0.000002250 0.000001948 0.000007548 0.000040753 0.000032587 -0.000001513 0.000021098 -0.000005815 0.000041035 0.000012302 -0.000001237 0.000011760 0.000001320 0.000045577 0.000022368 -0.000005618 0.000014833 -0.000007544 0.000014292 0.000039572 -0.000003240 0.000007540 0.000000461 -0.000036069 -0.000019525 0.000004676 -0.000011597 0.000007343 -0.000006475 -0.000008635 0.000000798 -0.000004463 -0.000003444 -0.000054060 -0.000028827 0.000002738 -0.000020711 -0.000000404 0.000019084 0.000011764 -0.000001806 0.000009317 0.000002854 0.139077271 -0.017053617 0.460155037 -0.040666019 -0.108340478 0.283501157 0.004223445 0.009255911 -0.014924719 0.439976501 -0.000440863 0.008596262 -0.013618660 0.149545655 0.209263167 -0.006702331 -0.002385115 -0.043519571 -0.000357231 0.056017843 -0.066215934 -0.014762802 0.054896963 -0.063855464 -0.029163418 -0.014549588 -0.063584395 0.042554010 -0.025108294 -0.104190430 0.057174172 0.024388597 -0.153859556 -0.003594055 -0.052241004 -0.011604766 -0.010083251 0.012750870 -0.030886630 -0.010238229 -0.009964414 0.006611242 0.005636559 -0.024396521 0.000143999 0.025243789 0.012191078 -0.010630244 -0.021495548 -0.006629248 0.007938847 -0.004336397 0.003050988 0.009521799 -0.009686931 0.007732526 -0.030085725 0.013924941 -0.006038000 -0.031589310 -0.007635314 0.038357748 -0.009862346 -0.003168795 -0.015047773 -0.000094979 0.000735813 -0.000465924 0.000206316 0.000527099 0.000234643 0.000082573 -0.000219873 0.000434810 0.000001811 -0.000142694 -0.000477960 0.000294997 -0.000450536 -0.000388016 -0.000031710 0.000056597 -0.000015636 -0.000008923 0.000016504 0.000037645 -0.000065211 0.000164720 0.000006666 -0.000043107 -0.000014755 -0.000081347 0.000114161 -0.000073583 -0.000060224 0.000032963 0.000532226 -0.000209824 0.000337329 0.000434089 -0.000057113 0.000196281 -0.000150193 0.000031186 0.000153990 0.000007296 0.000660213 -0.000299801 0.000408967 0.000653353 0.000120812 -0.000420810 0.000545330 0.000020743 -0.000094471 0.000108552 -0.000316167 0.000103408 -0.000018397 -0.000256051 0.000081434 -0.000680062 0.000124245 -0.000157772 -0.000592374 -0.000195351 0.000187980 0.000046906 -0.000111157 0.000275672 -0.000041418 -0.000444275 0.000156195 -0.000333013 -0.000509367 0.000214631 -0.001438687 0.000896619 -0.000443457 -0.001277944 0.000059672 -0.000622487 0.000323902 -0.000253993 -0.000549526 -0.000046112 -0.000004564 -0.000017618 -0.000054687 -0.000007067 0.000008784 0.000009531 0.000192119 0.000019729 0.000065688 0.000091704 -0.000221267 0.000006635 0.000010457 -0.000189204 -0.000027430 0.000025907 -0.000052150 -0.000050336 -0.000024533 0.000017353 0.000044962 -0.000161348 0.000028272 -0.000052146 -0.000232228 0.003396442 -0.002772103 0.001304368 0.002434659 0.000252736 0.001708322 -0.001410616 0.001222029 0.001332762 -0.000311507 0.003777308 -0.002852800 0.001256096 0.002511711 -0.000043303 -0.000048933 -0.000004968 -0.000085224 -0.000118517 -0.000028276 0.000613229 -0.000215790 0.000425541 0.000661893 -0.000034864 0.000391091 -0.000349392 0.000201344 0.000513673 0.000009790 -0.000103493 0.000070486 -0.000050940 -0.000077405 0.000039171 -0.000081740 0.000120966 0.000013546 -0.000023439 -0.000016509 0.000027608 -0.000022935 -0.000011222 0.000019428 0.000008620 -0.000135579 0.000057874 -0.000057789 -0.000107070 0.000036779 -0.000048817 0.000019997 0.000039044 -0.000036423 -0.000004865 0.000007086 -0.000013991 0.000002593 -0.000006186 0.000176101 -0.001844717 0.000666193 -0.000458320 -0.001537598 -0.000181284 0.000149168 0.000101313 -0.000282381 0.000172811 -0.000032152 0.000768346 -0.000099260 0.000282438 0.000704469 -0.000162468 0.001742913 -0.000613980 0.000341386 0.001441979 0.000328523 -0.001116468 0.000310482 0.000248414 -0.000922907 -0.000174706 -0.000662973 0.000346118 -0.000693193 -0.000535223 0.000007451 -0.000047394 0.000033643 0.000001778 -0.000033143 -0.000027356 0.000128981 -0.000020094 -0.000031834 0.000119958 0.000021628 -0.000055441 -0.000007398 0.000032791 -0.000054325 0.000007663 -0.000055538 0.000020418 -0.000004517 -0.000047959 -0.000053465 0.000156984 -0.000048853 -0.000033693 0.000124327 -0.000022422 0.000133140 -0.000086988 0.000049321 0.000083145 0.000019962 0.000016946 -0.000027725 0.000072650 0.000003863 0.000007634 0.000005733 -0.000004865 0.000015905 0.000003278 0.000036387 0.000027046 0.000016848 0.000090539 0.000047182 0.000029663 0.000111878 -0.000034984 0.000118014 0.000104284 0.000008832 -0.000001740 0.000005547 0.000018049 0.000002222 0.000038756 0.000026413 -0.000035652 0.000100467 0.000013400 0.000004480 0.000023034 -0.000071919 0.000050808 -0.000013145 -0.000029121 -0.000015832 0.000046113 -0.000121447 0.000005917 0.000011569 -0.000027080 0.000078805 -0.000000173 0.000018604 -0.000063066 -0.000105211 0.000065387 -0.000222182 -0.000084550 -0.000015941 -0.000012504 0.000018390 -0.000060386 -0.000004853 -0.000007388 0.000041415 -0.000062974 -0.000021397 0.000002839 0.000024484 0.000028297 0.000016028 0.000053499 0.000044002 0.000007252 0.000002631 0.000007490 0.000012171 0.000007831 -0.000006244 0.000018095 0.000012608 -0.000010164 0.000027153 0.000011560 0.000011151 0.000008309 0.000026176 0.000018181 0.000010315 0.000015310 -0.000007312 0.000029608 0.000014783 -0.000011708 -0.000025683 0.000014722 -0.000033265 -0.000019969 -0.000045272 -0.000051575 0.000021780 -0.000160804 -0.000045194 0.000048220 0.000019068 -0.000071456 0.000174565 -0.000012183 -0.000042160 -0.000060199 0.000010574 -0.000127120 -0.000070362 -0.000026546 0.000007041 -0.000030898 -0.000084616 -0.000015549 0.000010473 0.000003880 -0.000014276 0.000035868 -0.000002109 0.000010874 -0.000012604 0.000041786 0.000020973 0.000014506 -0.000008351 -0.000024181 0.000022046 -0.000027364 -0.000013717 0.000005183 -0.000000736 -0.000000215 0.000013222 0.000001395 0.000007057 0.000019201 -0.000012267 0.000023656 0.000014228 -0.000005802 -0.000006814 0.000003092 -0.000022381 -0.000007151 0.000002996 -0.000000946 -0.000003703 0.000009360 -0.000001487 0.000011448 0.000028199 -0.000019150 0.000038654 0.000020223 0.001694033 -0.008835376 0.005312992 -0.001962159 -0.005773973 0.000274802 -0.005696912 0.003848105 -0.002524785 -0.003638576 -0.000500130 0.001208291 -0.000071116 0.000184688 0.001454986 -0.002237536 0.009913141 -0.005080926 0.001590848 0.006315025 -0.000781789 0.008618141 -0.005168096 0.003510814 0.005629641 0.001014826 -0.005561025 0.003279353 -0.002016487 -0.005812658 -0.001118691 -0.005123017 0.002356974 -0.000348612 -0.000401684 0.001318937 -0.003508447 0.001913760 -0.001156107 -0.000754237 0.001415324 -0.002400301 -0.001347352 0.000324362 -0.000059931 -0.000091455 -0.000395439 0.000295056 -0.000251546 -0.000302446 -0.000053967 0.001310097 -0.000297378 0.000097519 0.001216792 -0.000297802 0.000291080 0.000152225 -0.000440272 0.000290277 0.000409927 0.000069846 -0.000787919 0.001571406 -0.000424071 -0.000024192 -0.000943985 -0.000120041 0.000343543 -0.001122959 -0.000136507 -0.001661770 0.000363020 -0.000424471 -0.001586424 -0.000259806 0.000579151 0.000957012 -0.001706507 0.001264172 -0.000058978 0.000820998 0.000105112 -0.000558062 0.001025342 0.000223759 0.000306847 -0.000033263 0.000460159 0.000318690 0.000279608 0.000517723 -0.002001453 0.003031655 -0.001167506 -0.000440689 -0.002054772 0.001453267 -0.001141531 -0.001793757 -0.001288988 -0.000648901 0.000771161 -0.003449467 -0.000039782 -0.000247249 -0.000572392 0.000757202 -0.001182811 0.000078856 0.000357867 0.001023039 -0.000885328 0.001146929 0.000264514 0.000218359 -0.000346291 0.000337222 0.000411090 0.000025604 0.000096989 -0.000260037 0.000432873 0.000233526 -0.000297800 -0.000427768 0.000103620 -0.000035035 -0.000215961 0.000639591 0.000593783 0.000450788 -0.000736278 0.003313659 0.000324865 -0.000058752 -0.000180402 0.000325070 -0.000337810 -0.000002463 0.000037818 0.000409325 -0.000357042 0.000306415 0.000227177 0.000229426 0.000107580 -0.000121552 0.000720125 0.000009323 -0.000239907 -0.000739579 0.000488433 -0.000891295 -0.000498608 0.000077290 0.000309951 -0.000062621 0.000150874 0.000299382 0.000351218 0.001012622 -0.000429918 0.001021450 0.000857508 0.000002261 0.000028862 -0.000046834 0.000039495 0.000001498 -0.000063392 -0.000278791 0.000116120 -0.000198481 -0.000226020 -0.000161424 -0.000417557 0.000186559 -0.000495067 -0.000343980 0.000469642 0.000784684 -0.000823203 0.001725621 0.000363267 -0.000918463 -0.001393351 0.001210943 -0.001772233 -0.001131245 -0.000064257 0.000108407 -0.000211953 0.000000214 -0.000191752 -0.000008182 0.000052654 -0.000099193 0.000188061 -0.000201880 0.000092845 0.000124597 0.000069929 -0.000518533 0.000616360 0.000036840 0.000245485 -0.000184837 0.000023818 0.000112341 -0.000052573 -0.000160294 0.000208535 -0.000394319 0.000114832 0.000140350 0.000203394 -0.000226225 0.000229334 0.000200405 0.000095557 0.000176889 -0.000149725 0.000246159 0.000067949 0.000022185 -0.000033283 0.000135330 -0.000900084 -0.000010995 0.000157757 0.000186095 -0.000119691 -0.000228111 0.000242699 0.000252029 0.000262835 -0.000322206 0.000756999 0.000187429 -0.000148546 -0.000053072 -0.000024610 -0.001726031 -0.000381153 -0.000018858 -0.000223054 0.000102977 -0.000545531 -0.000926059 -0.000037002 -0.000210248 0.000778291 -0.001032601 0.000635582 -0.000047399 0.000243167 -0.000220161 0.000332239 0.000410442 0.000542481 0.000431567 -0.000510412 0.000923454 0.000357221 -0.000507023 -0.000577118 0.000547297 -0.000787743 -0.000422763 -0.000004791 0.000014707 -0.000024669 -0.000033068 0.000013956 0.000019677 -0.000023746 0.000023735 0.000030203 -0.000019003 0.000045822 -0.000038596 0.000018727 0.000122151 -0.000038946 0.000007569 0.000056076 -0.000036940 0.000018396 0.000024024 0.000009096 -0.000028063 0.000080287 -0.000042624 0.000079552 -0.000013988 0.000036175 0.000032761 -0.000128262 0.000107745 -0.000003691 -0.000056823 0.000053253 -0.000037487 0.000002125 0.000013582 0.000049883 -0.000084025 0.000085044 0.000020939 0.000002656 0.000084768 -0.000094940 0.000067104 0.000030435 0.000009456 0.000012742 -0.000010993 0.000033040 0.000007304 0.000012014 0.000015432 -0.000023349 0.000045346 0.000000531 0.000011776 0.000050794 -0.000006488 0.000021155 0.000051739 -0.000015316 -0.000021939 0.000022035 -0.000053718 -0.000010411 -0.000004967 -0.000011746 0.000019107 -0.000025496 0.000001651 0.000014533 0.000043741 -0.000019391 0.000039765 0.000036314 0.000016973 0.000028711 -0.000040090 0.000068708 0.000002657 0.000010702 0.000059070 -0.000018134 0.000029020 0.000052977 0.000009322 0.000033483 -0.000011875 0.000025841 0.000029806 -0.000160742 -0.000880408 0.000499157 -0.001975791 0.000494340 -0.000206185 -0.000687355 -0.000068859 -0.003207248 -0.003936599 0.000348854 0.000702653 0.000184980 0.005156648 0.002351844 0.000124000 0.000885740 -0.000388537 0.001156139 0.001362904 0.000140633 -0.000250727 0.000194246 0.000847419 -0.001090034 0.000023308 -0.000878591 0.000129709 -0.002087664 0.000528542 0.000036782 0.000090127 -0.000192541 -0.000030886 0.000765955 -0.000020585 0.000311424 -0.000180628 0.000662850 0.000345749 0.000117960 0.000501215 0.000039892 0.000989854 -0.000343959 0.000129364 0.000078070 0.000132799 0.000563825 0.000244676 0.000151314 -0.000002306 0.000100415 0.000362632 0.000784185 -0.000251315 -0.000417660 -0.000142226 -0.001252966 -0.000217093 -0.000001904 -0.000017493 0.000004507 -0.000048247 -0.000482782 -0.000129408 0.000143345 -0.000137139 -0.000309281 -0.000686362 0.000011968 0.000207544 -0.000035710 -0.000184953 0.000598476 0.000068656 0.000062914 -0.000101178 0.000672289 0.000709063 0.000081843 0.000206639 0.000150584 0.000745686 0.000685930 -0.000161969 -0.000260561 0.000135677 -0.000905076 -0.001720208 -0.000076782 -0.001228719 0.000625834 -0.001025736 -0.001455506 -0.000030170 0.000126500 -0.000160927 0.000091697 0.000106610 0.000074742 -0.000952888 0.000391576 -0.000690733 -0.001223774 -0.000033302 -0.000007922 0.000028309 -0.000032512 -0.000023913 0.000025482 0.000107171 -0.000083971 0.000154267 0.000122693 -0.000019674 -0.000290690 0.000117877 -0.000291217 -0.000287158 -0.000418810 -0.000092148 -0.000407207 -0.001496544 -0.000398583 -0.000188750 -0.000275983 -0.000316960 -0.000817904 -0.000448019 0.000341772 -0.000245253 0.000650967 0.001198796 0.000194666 -0.000018576 0.000003797 0.000017636 -0.000045434 0.000045023 0.000003264 0.000005137 -0.000000915 0.000076477 0.000029820 -0.000020427 -0.000025661 0.000020073 -0.000150777 -0.000049466 -0.000035104 -0.000029126 0.000039928 -0.000200551 0.000013100 0.000025334 0.000106478 -0.000043970 0.000154458 0.000181388 0.000045355 0.000173495 -0.000037324 0.000307216 0.000274454 0.001564108 0.002327826 0.000504477 0.000448121 0.000359237 0.000385022 0.001439530 0.000059870 0.000168117 0.000071093 -0.000557583 -0.000017530 -0.000186861 -0.000166158 -0.000114995 -0.000481152 -0.000453470 -0.000698561 0.000193739 0.000008070 -0.000954712 -0.001149736 -0.000414240 0.000118026 -0.000015028 -0.000497672 -0.000170067 0.000053809 -0.000110502 -0.000049653 -0.000969638 0.000703365 -0.001194773 0.000204663 0.000251419 0.000594774 0.001318989 -0.000486489 0.000153790 0.000197683 0.000720712 0.000647198 0.000357439 0.000136366 0.000111376 0.001547223 -0.000144087 0.000336549 0.000032307 -0.000047519 0.000964218 0.000871230 0.000935047 0.000244972 0.000183615 -0.000753553 -0.000068620 -0.000458411 -0.000023100 -0.000027375 -0.003177349 0.000341062 -0.000847133 0.000000952 0.000190199 -0.000620651 0.001010480 -0.002730148 0.000322178 0.000278301 -0.002279614 -0.001703308 -0.003531688 0.000041704 -0.000074037 0.000058835 -0.000399934 0.000013763 -0.000016545 -0.000096406 -0.000087526 -0.000050647 0.000224884 -0.000168018 -0.000039942 0.000133272 0.000227398 -0.000132357 0.000234629 0.000105666 0.000043161 0.000145028 -0.000090689 0.000092524 0.000037841 -0.000017682 0.000027172 0.000020755 -0.000009692 -0.000015435 0.000041264 0.000116778 -0.000088968 0.000097950 0.000039421 0.000454013 -0.001047682 0.001641049 0.000147304 -0.000069071 0.000702279 -0.001185263 0.001649036 0.000360009 -0.000192478 0.000411728 0.000117255 -0.000021824 0.000490513 0.000159509 -0.000007309 0.000216591 0.000011747 0.000019173 0.000042363 -0.000003775 0.000128006 0.000064949 0.000003227 0.000010429 0.000032477 0.000204380 -0.000164656 0.000110797 0.000107072 -0.000779242 -0.000579220 -0.001864681 -0.000051679 -0.000054834 -0.000189965 -0.000028264 0.000699502 -0.000098822 -0.000116127 -0.000229374 0.000881574 0.000794132 0.000246120 0.000251940 0.000214298 -0.000044791 0.000191522 0.000722295 0.000091805 -0.000017303 0.000122616 0.000023479 -0.000010127 0.000140288 -0.000179522 0.000278090 -0.000391597 -0.000552777 0.000070735 0.000214616 0.000117679 0.000166126 0.000768966 0.000281361 0.000158731 0.000236579 0.000167870 0.000696405 0.000388443 -0.000074759 0.000182274 -0.000228303 -0.000213271 0.000034683 -0.000089293 0.000091209 -0.000437934 -0.000101197 -0.000053517 -0.000378548 0.000715215 -0.000824536 -0.000228821 0.000141768 -0.000220186 0.000070444 -0.000051657 -0.000293178 -0.000075299 -0.000251044 0.000423514 -0.001085498 -0.000043911 0.000013182 -0.000213976 0.000341955 -0.000630679 -0.000073146 0.000085848 -0.000087228 -0.000340949 0.000494968 -0.000295995 -0.000150013 0.000138305 0.000180145 -0.000396327 -0.003711024 -0.000504491 0.000490313 -0.000029099 0.000012424 -0.001807347 -0.000337584 -0.000667602 0.000069944 0.000125076 0.002046642 -0.000702169 0.001755145 -0.001118535 0.001205640 0.004767634 0.003176209 0.000057524 0.000525331 -0.001357835 -0.002563155 0.002766848 -0.000921287 -0.001399502 0.001530069 0.002054002 0.008044031 -0.000175341 -0.000489629 0.000602801 0.002690976 0.000397307 -0.000161011 0.000046092 0.000028577 0.000703212 -0.000350906 0.000205241 -0.000161292 0.000250993 0.000180866 0.000035235 -0.000110549 0.000161293 -0.000354793 -0.001919262 -0.000715401 0.000152116 0.000156279 -0.000233610 -0.001186390 -0.000024750 -0.000297060 -0.000264429 0.000331331 0.001630894 0.000027345 -0.000024519 -0.000098571 0.000035507 -0.000265399 -0.000169353 0.000011273 -0.000040765 0.000026805 0.000065139 0.000017919 -0.000020798 -0.000055857 -0.000008331 -0.000226296 -0.000086186 -0.000037767 -0.000082092 0.000010904 -0.000157654 -0.000107150 0.000004395 -0.000026568 -0.000008610 -0.000053199 0.000006084 0.000011448 -0.000047875 0.000040577 0.000117564 0.000040331 -0.000423357 0.000186718 -0.000532147 -0.001818406 -0.002778265 -0.000090096 -0.000122710 0.000060977 0.000549487 -0.000106647 0.000243830 0.000526817 -0.000392763 -0.001342606 -0.000265993 0.000409862 0.000197346 -0.000257182 -0.001196726 0.000272209 -0.000084791 0.000148342 -0.000055743 0.000094384 -0.000667571 0.000164092 0.000004225 -0.000004907 -0.000816745 0.000216611 0.000003860 0.000367583 -0.000200174 -0.000009781 0.000003204 0.000112519 0.000072782 -0.000172976 -0.000046123 0.000160183 0.000039194 -0.000558657 0.000276484 0.000332315 0.000142893 -0.000010829 0.000011064 -0.000066898 -0.000288958 -0.000240192 -0.000010384 -0.000034716 -0.000039933 -0.000216807 -0.000133143 0.000027070 -0.000004676 0.000040436 0.000220386 0.000104739 -0.001854287 -0.007276628 -0.004010482 0.002117617 0.000946181 0.000513996 0.003502616 0.000080698 -0.001432843 0.001221157 -0.005614577 -0.003477686 0.006739569 0.001682292 0.001308742 0.001155726 0.000290372 0.001142693 -0.000778213 0.000239531 0.001346243 -0.003189167 0.002028412 -0.000150512 0.000369152 0.000932455 0.000549384 -0.000204297 -0.000071602 0.000152435 0.000251222 0.001658125 -0.000677708 -0.000492536 -0.000183337 -0.002320419 -0.002410645 -0.000394981 0.000363787 -0.000276594 0.000075682 0.001227976 -0.000595445 -0.000496755 -0.000327786 -0.001043611 0.000380928 -0.000225262 0.000174084 -0.000228668 0.000611182 -0.000264534 0.000760544 0.000137091 0.000373435 -0.000484101 0.000256425 -0.000940498 0.000038337 -0.000153092 0.000116025 -0.000070823 0.000021466 0.000111341 0.000134652 0.000111754 -0.000146475 0.000213502 0.000762457 0.000328755 -0.000003503 -0.000190128 0.000311532 0.000374058 0.000065416 0.000007898 -0.000116196 0.000070883 -0.000029041 -0.000022143 -0.000105085 -0.000437483 0.000159922 0.000042429 0.000010425 0.000033849 -0.000033852 0.000026869 0.000028254 0.000001362 -0.000065033 -0.000629526 0.000685121 0.000515545 0.000142944 -0.001015220 0.001673000 -0.001521906 -0.000327807 -0.000469005 0.000371968 -0.000682761 0.000041054 0.000252585 0.000125463 0.000846584 -0.000189368 0.000684769 0.000087332 0.000346574 0.000421296 -0.002230854 0.001118448 0.000326131 0.000253934 0.000521897 -0.000087863 0.000627801 0.000028580 0.000217097 0.000012462 0.000247931 -0.000109205 0.000023697 0.000029982 -0.000106754 -0.000186034 -0.000029291 -0.000095428 -0.000063095 0.000035789 0.000193376 -0.000065799 0.000089911 0.000049948 0.000049041 -0.000017446 0.000023243 0.000038298 0.000034867 -0.000008113 -0.000185647 0.000107709 -0.000050317 -0.000046191 0.000015210 -0.000005242 0.000050180 0.000073330 0.000023887 -0.000031741 0.000052548 -0.000035972 0.000001780 0.000022844 -0.000047733 -0.000051241 -0.000028987 -0.000061669 -0.000078148 0.000176419 0.000124398 -0.000133956 0.000274822 0.000111691 0.000023886 0.000032502 -0.000015620 0.000049773 0.000031779 0.000024176 -0.000040511 0.000061238 0.000004887 -0.000007317 -0.000013181 0.000014335 -0.000015022 -0.000017545 0.000006594 -0.000064289 -0.000059648 0.000055300 -0.000119857 -0.000050624 -0.000021912 -0.000035914 0.000028222 -0.000048482 -0.000027317 0.000018989 0.000014855 0.000001636 0.000043323 0.000015886 0.000029765 -0.000052391 0.000071763 0.000001449 -0.000006808 0.000016521 0.000047328 -0.000048754 0.000053643 0.000027272 -0.000017797 -0.000021112 0.000008590 -0.000036541 -0.000016442 -0.000043737 0.000041182 -0.000025246 -0.000093930 0.000032417 -0.000277677 -0.000280344 0.000249996 -0.000409305 -0.000205091 0.000297680 0.000245050 -0.000321649 0.000542460 0.000267941 0.000019587 -0.000021413 -0.000019047 0.000131661 -0.000026445 -0.000013728 0.000136545 -0.000195012 0.000037638 0.000060162 0.000031732 0.000043739 -0.000101636 0.000133584 -0.000004255 0.000646679 0.000614542 -0.000704458 0.001035672 0.000470479 0.000345683 0.000232538 -0.000314639 0.000455715 0.000101368 -0.000532955 -0.000536409 0.000622253 -0.001104264 -0.000507217 -0.000032115 0.000073446 0.000032828 0.000075970 0.000125697 0.000028467 -0.000084698 0.000167197 -0.000049192 -0.000014489 -0.000013761 0.000058693 -0.000087359 0.000051078 0.000028373 0.207201233 -0.020381382 0.918402391 -0.055337928 -0.173151635 0.715831070 -0.086079249 -0.060174964 -0.059465413 0.390799756 -0.001888339 -0.570157398 0.057476600 0.060398671 0.633909847 -0.002718305 0.053015949 -0.070419222 -0.003390810 -0.054355325 0.004902736 0.061585975 -0.004079047 -0.063800428 -0.069826979 -0.002901357 -0.176157754 0.192515312 -0.020378618 -0.016752129 -0.008120569 0.186636085 -0.398873622 0.041242824 0.010464322 0.004398870 -0.015366722 0.031274859 -0.061569436 -0.000037146 0.000073289 0.000795612 -0.002573626 0.000736584 -0.000676108 -0.000159626 -0.001474694 0.000540039 0.000639344 0.000627939 -0.000237592 0.000756388 0.001371210 -0.000251488 -0.000363372 -0.000004234 0.000097392 -0.000082867 -0.000002854 -0.000039979 0.000044993 -0.000134863 0.000309341 -0.000301966 0.000045495 0.000010315 0.000105445 0.000282519 -0.000180082 -0.000048359 0.000235997 -0.000748744 -0.002062356 -0.000203368 -0.000114508 0.000023481 0.000269894 -0.000721285 0.000142239 -0.000190195 0.000265805 -0.000083237 -0.002504688 -0.000137618 -0.000211584 0.000214220 -0.001656190 0.001161856 -0.001486840 0.000545925 -0.000130911 -0.000502585 0.001400867 0.000003340 0.000370298 -0.000430700 -0.000617613 0.002672902 0.000454031 0.000624205 0.000104435 0.001589963 -0.000768845 -0.000464482 -0.000595985 -0.000174931 -0.000084984 0.001783643 0.000121908 0.000114182 -0.000314409 -0.002084460 0.005714723 -0.001217651 0.001438074 -0.000229835 -0.000203116 0.002591620 -0.000118578 0.000470243 -0.000007500 0.000091748 0.000013525 -0.000009523 -0.000035664 0.000151336 -0.000285958 -0.000203263 -0.000668109 -0.000030202 -0.000107634 -0.000416915 0.001003688 0.000323533 0.000440916 -0.000042082 0.000257234 -0.000007640 0.000150374 -0.000015187 -0.000095257 0.000085534 0.000262124 0.000464921 0.000198645 0.000308252 0.002503789 -0.013118833 0.005178903 -0.002521263 0.000299347 -0.002522796 -0.006403706 0.002181011 0.000176545 0.000543936 0.003941464 -0.012979794 0.004641506 -0.002446554 -0.000075869 0.000301683 0.000345839 0.000295361 -0.000077188 0.000222746 0.000383811 -0.002817866 -0.000298550 -0.000334973 0.000096931 0.000752207 -0.001993113 0.000478786 -0.000416757 -0.000010564 -0.000018888 0.000327902 -0.000049310 0.000026591 0.000037584 -0.000094355 0.000209519 -0.000203142 0.000038291 0.000003434 0.000074531 -0.000112092 0.000018209 -0.000046957 -0.000048907 -0.000056195 0.000472681 -0.000014996 0.000079844 -0.000014973 -0.000191223 0.000249493 -0.000006549 0.000149252 -0.000020657 -0.000006074 0.000027485 0.000031949 0.000005068 -0.000744798 -0.001104969 0.006710142 0.000044966 0.001467277 0.000170906 0.001022678 -0.001170752 -0.000417432 -0.000710650 0.000475117 0.000100812 -0.002972974 -0.000467222 -0.000700413 0.000695201 0.000861622 -0.006362881 0.000005970 -0.001512518 -0.000452168 -0.001779019 0.004688468 0.000034016 0.001858776 -0.000248538 0.000968692 0.001806528 -0.000232921 -0.000353440 -0.000004587 -0.000060300 0.000176183 -0.000064412 0.000060449 0.000079481 0.000177269 -0.000557756 -0.000063322 -0.000183834 -0.000036574 -0.000128369 0.000262122 0.000069190 0.000124675 -0.000034814 -0.000036739 0.000227307 0.000004198 0.000041075 0.000040970 0.000285177 -0.000649454 0.000024591 -0.000307531 -0.000046274 0.000120544 -0.000401179 0.000182904 -0.000183572 -0.000024932 -0.000118783 0.000037794 0.000070951 0.000065237 -0.000003394 -0.000038696 0.000015951 0.000005816 0.000034607 0.000088644 -0.000214142 -0.000101521 -0.000117661 0.000141819 0.000088006 -0.000178563 -0.000359311 -0.000058040 0.000075419 0.000014069 -0.000053972 0.000015820 -0.000027175 0.000044814 -0.000011830 -0.000213266 0.000053091 0.000052036 0.000161129 -0.000105649 -0.000017423 0.000062333 0.000250788 -0.000033259 0.000071412 0.000179131 -0.000114407 -0.000138453 -0.000064135 0.000127962 -0.000095161 -0.000063657 -0.000248259 0.000070923 -0.000027601 0.000359028 0.000183943 -0.000078205 -0.000184246 0.000011916 0.000102423 -0.000009840 -0.000046720 -0.000041487 -0.000082236 0.000074938 -0.000015491 0.000162133 -0.000035790 0.000076023 -0.000132186 -0.000117678 -0.000114645 0.000092445 0.000019686 -0.000037987 -0.000008548 -0.000035298 0.000033740 0.000039886 0.000036308 -0.000131154 -0.000060039 -0.000041099 0.000031957 -0.000062045 -0.000041335 -0.000052341 0.000045823 0.000008742 -0.000052752 -0.000035229 -0.000001264 0.000028758 -0.000006350 0.000057897 0.000048991 -0.000007394 -0.000038155 -0.000036267 0.000275172 0.000087007 0.000016433 -0.000142742 -0.000103396 -0.000313638 0.000188475 0.000223987 0.000126637 -0.000086596 0.000257305 0.000190115 0.000050046 -0.000136461 -0.000069252 0.000182812 0.000011990 0.000102744 -0.000094784 -0.000016828 -0.000060960 0.000030131 0.000041078 0.000028330 0.000077789 -0.000080125 -0.000041957 -0.000136725 0.000052442 0.000011790 0.000037086 0.000030886 -0.000039696 -0.000021623 0.000003850 -0.000029496 0.000003892 -0.000002702 0.000017054 0.000004217 -0.000038541 -0.000040197 0.000010415 0.000022625 -0.000003943 0.000034914 0.000014235 -0.000003942 -0.000013969 -0.000003973 -0.000016769 0.000008245 0.000010443 0.000007212 -0.000001423 -0.000056728 -0.000048435 0.000026157 0.000030246 -0.001606942 -0.018418037 0.029344705 -0.004335280 0.007134378 -0.001172810 -0.006314988 0.018577005 -0.003601933 0.002271100 0.001217465 0.006464984 -0.004767515 -0.003000945 -0.001162638 0.002047362 0.024485287 -0.028037071 0.001072219 -0.008798367 0.001905321 0.010634956 -0.040520396 0.010022091 -0.006999273 -0.002579516 -0.011388016 0.025071489 -0.000492852 0.005085241 0.000338322 0.001161732 0.002021947 -0.002795101 -0.001386308 0.000195342 0.003898994 0.002928156 -0.000730905 -0.001509990 0.000332733 -0.002068455 0.001968122 -0.002118535 0.000053820 -0.000130733 0.000253351 0.000981084 -0.000128312 -0.000647044 0.000839708 0.000543838 -0.004895134 -0.000686245 -0.000607975 0.000194313 0.001470072 -0.002010898 -0.000301799 -0.001881236 -0.001070742 -0.002773206 0.002433386 0.002342847 0.001452477 -0.001242817 -0.000484788 0.004153395 0.001798825 0.000000139 -0.001174104 0.000287888 0.005797582 0.001085004 -0.000127979 0.002368440 0.002224885 -0.005421337 -0.004197842 -0.000718465 0.000849888 0.001081843 -0.003686690 -0.001353160 -0.000498935 0.000498517 -0.001249016 -0.000748986 -0.000554942 0.000903141 -0.003480836 -0.002326801 0.004402432 0.007105110 -0.000554759 0.001012902 0.001230997 0.003656327 -0.002882184 0.000252818 -0.000838882 0.009176630 -0.002483865 -0.000022968 -0.005821643 0.000471740 0.003512523 -0.000693727 -0.001568325 -0.002304314 -0.000317390 -0.002544175 -0.001223771 0.001122950 0.003639268 0.000499445 -0.002124359 0.000490537 -0.000769589 0.002070027 0.000904585 -0.000628463 0.000468949 -0.001827829 0.000834927 -0.000915371 0.002812589 -0.000998970 0.001084640 -0.001531438 -0.001671158 -0.003699253 0.001826533 0.001108884 0.001968793 0.000397907 0.000372130 -0.000182686 -0.001114157 0.000107267 -0.000387767 0.000036849 -0.000597647 0.001020882 -0.000343266 0.000131590 -0.001663607 0.000439565 0.000050795 0.001092404 -0.000023640 0.001333405 0.001385078 -0.000560800 -0.000682109 0.000247281 -0.000316189 -0.000926119 -0.000261674 0.000270635 0.000420884 -0.001737971 -0.002362104 -0.000059911 0.001107194 -0.000050210 -0.000014539 -0.000014842 0.000121573 -0.000016042 -0.000085539 0.000283960 0.000674717 -0.000011840 -0.000171931 -0.000149379 0.000831002 0.000895973 -0.000018794 -0.000498305 0.000207605 -0.006550364 0.001296786 0.001319314 0.001528631 -0.000379887 0.007072703 0.001138866 -0.001105718 -0.002737383 -0.000301098 0.001430294 -0.000110756 0.000285280 0.000466446 -0.000132399 -0.000077850 0.000228171 0.000244681 -0.000023455 0.000314551 -0.000358175 -0.001136025 -0.000545573 0.000810492 -0.000167357 -0.000097916 -0.000352630 0.000284103 0.000468411 0.000102152 0.000614361 -0.000213327 -0.000383355 -0.000366054 -0.000001853 -0.001251584 -0.000117306 0.000293893 0.000993515 0.000168000 -0.001124692 -0.000065496 -0.000035885 0.000991472 0.000710241 -0.000199191 -0.000403992 -0.000759490 0.000420313 0.000366561 -0.000899298 -0.000497144 0.000158328 0.000271604 -0.000211239 -0.001590036 0.000193009 0.000722972 0.000557783 0.001056544 0.001417719 -0.000179107 -0.000026123 -0.000293883 0.000586560 0.000103121 0.000804185 -0.001184483 0.000277337 0.000392972 -0.000269911 -0.002312502 -0.003393444 0.000641865 -0.000193457 -0.000153267 -0.001015317 0.002597440 -0.000894685 0.000119770 -0.003339573 0.000741621 0.001115679 0.001255469 -0.000385503 0.004300173 0.000788133 -0.002448245 -0.001181483 -0.000033214 0.000020386 -0.000000798 0.000079358 -0.000016843 0.000059826 -0.000192536 0.000112223 -0.000104264 0.000158504 0.000072744 -0.000385102 0.000205580 -0.000094909 0.000277691 -0.000018832 -0.000031612 -0.000078514 0.000060491 0.000013821 0.000146171 -0.000068265 -0.000135099 -0.000241257 0.000057312 0.000082584 0.000099205 -0.000233852 -0.000123554 -0.000046513 0.000056018 -0.000001283 0.000027806 -0.000111170 0.000010505 -0.000111772 -0.000065291 0.000008419 0.000297608 -0.000066250 -0.000122319 0.000024372 -0.000084665 0.000317145 -0.000132903 -0.000005581 -0.000053758 -0.000003623 0.000019448 0.000029166 -0.000018090 -0.000075817 0.000016354 0.000051504 0.000039820 0.000044967 -0.000044967 -0.000161663 -0.000054552 0.000040256 0.000010609 0.000089062 0.000006096 -0.000040717 -0.000047887 0.000019189 0.000034416 -0.000012222 -0.000047612 -0.000015647 0.000018637 -0.000071592 -0.000101030 -0.000002910 0.000049810 -0.000031437 -0.000106518 0.000015607 0.000088420 0.000057079 0.000027414 -0.000039030 -0.000163697 -0.000018089 0.000028264 0.000019134 -0.000044928 -0.000092590 -0.000011175 0.000027531 -0.001246439 -0.000112878 0.001665499 -0.001586131 -0.000026078 -0.002030788 0.001057019 0.003616730 0.000285124 -0.000623125 -0.001379053 -0.001829008 -0.004032070 -0.001183774 0.000603771 -0.001164844 -0.000282938 -0.003046449 -0.000767396 -0.000265103 0.001407133 -0.001780365 0.001219052 -0.000186403 0.000836558 -0.002378808 -0.000759865 0.003390573 -0.000553717 0.000057523 -0.001360580 0.000594452 0.000210112 0.000968595 -0.000227460 -0.000307158 0.000351256 -0.001008801 0.000324853 -0.000149315 0.002125769 -0.000730395 -0.002671812 -0.000928094 0.000222149 0.000470544 -0.000930008 -0.000479115 -0.000359413 0.000436837 -0.000542507 -0.000549753 0.000089656 -0.000113117 0.000342183 -0.001734733 0.001667426 0.002153690 0.000844853 -0.000650509 0.000454887 -0.000222076 -0.000007185 -0.000102874 0.000032603 0.000674642 0.000633603 -0.000619138 0.000191387 -0.000370841 -0.000121087 0.000434808 -0.000829421 0.000213154 -0.000166132 -0.000924360 -0.000138258 0.000307953 0.000272870 0.000158160 0.000789644 -0.000368786 -0.001519921 -0.000613303 0.000122668 0.001482658 0.000207796 0.000411630 -0.000322794 -0.000214479 0.000011127 -0.001482493 0.004752182 -0.001401956 0.000730134 -0.000239316 0.001650887 -0.000957467 0.001116237 -0.000373518 -0.000352723 -0.001898766 0.004497505 -0.000710220 0.000879934 -0.000003227 0.000229331 -0.000103191 -0.000087970 -0.000105220 -0.000038271 -0.000071960 -0.000282556 0.000257943 -0.000002426 -0.000073958 -0.000037684 0.000944265 -0.000079437 0.000081025 -0.001245396 0.002823151 0.000885089 0.001476609 -0.001361635 -0.001222688 0.001348254 0.001677610 0.001392407 -0.000650851 0.001350299 -0.002532649 -0.000281912 -0.001912887 0.001244274 0.000018210 0.000132914 -0.000130064 -0.000031375 -0.000067263 0.000026438 -0.000011830 -0.000055047 -0.000006595 0.000001594 0.000010508 0.000107778 0.000046000 -0.000038933 -0.000047378 0.000148140 0.000117839 -0.000072417 -0.000118615 -0.000062981 -0.000021256 0.000004536 -0.000339543 0.000109254 -0.000002516 0.000072071 -0.000082147 -0.000612604 0.000025053 0.000032000 -0.000004450 -0.000639196 -0.000548603 -0.000260340 -0.000181592 -0.000187255 -0.000226509 -0.000583600 0.000525371 0.000184345 -0.000140157 0.000530059 -0.000183138 0.000400967 -0.001102325 -0.000074481 -0.001111182 -0.000017710 0.000874136 0.000885004 0.000079344 -0.000805346 0.000165361 0.000164997 0.000732667 0.000077474 0.000110570 0.000141429 -0.000383866 -0.000114427 -0.000283500 -0.000579700 -0.001911780 0.001724634 0.000623738 -0.000235383 -0.000116035 -0.001114557 0.000927379 0.000351384 0.000006971 -0.000090418 -0.000028474 -0.000016507 0.000185334 0.000094369 -0.000366425 0.000863587 -0.001012879 -0.000180565 0.000278083 -0.000464934 0.000303394 -0.001462730 -0.000131729 -0.000014621 -0.000003688 0.000006559 0.000484579 0.000253480 0.000267279 0.001282283 -0.000288290 -0.001124692 -0.000481225 -0.000320014 -0.001551256 -0.001656538 0.001690122 0.001001418 -0.000348912 -0.001066393 -0.000677538 0.000347275 0.000230818 0.000015347 -0.000085660 0.000325448 0.000079907 0.000066822 0.000042218 0.000544696 0.000014321 -0.000348452 -0.000456016 -0.000005708 -0.000494564 -0.000204122 0.000125613 0.000359564 -0.000023334 -0.000210311 -0.000111408 0.000166833 0.000187485 -0.000007090 -0.000013625 0.000024807 -0.000010492 -0.000010710 -0.000020728 -0.000200529 -0.000099046 0.000147891 0.000172946 0.000696165 -0.000770750 0.002025665 -0.003094624 -0.000021670 0.000626707 -0.001657828 0.003033189 -0.002980998 0.000697105 0.000026479 -0.001148663 0.000070745 0.000144498 0.000848519 0.000021047 0.000041828 -0.000164347 -0.000130135 -0.000032402 0.000015614 0.000019195 -0.000023747 -0.000061779 -0.000002276 0.000003474 -0.000150423 -0.000451579 -0.000021188 0.000011856 -0.000127990 -0.000089890 0.000016108 0.000353412 0.000058124 0.000156581 0.000415489 0.000838845 -0.000500962 -0.000208639 0.000412190 0.000435140 0.000198548 -0.001985858 -0.000407151 0.000465184 -0.001505668 0.000017404 -0.000629429 0.000732059 0.000164762 0.000132692 -0.000553970 -0.000220240 -0.000057355 -0.000667019 0.001461208 -0.000364500 0.001025347 -0.000705969 0.000579307 -0.001406213 -0.000607955 -0.000712654 0.000693174 0.000730937 -0.001044022 -0.001155808 -0.000806038 0.000489422 -0.000263749 0.000642837 -0.000307225 0.000581423 -0.000323419 -0.000204756 0.000203128 -0.000250764 0.000847538 0.000034039 -0.000301162 0.001084294 -0.001800698 0.001452644 -0.000561521 -0.000064493 0.000732415 -0.000203077 0.000153564 -0.000441933 -0.000427610 0.000177068 -0.001029804 0.001910859 0.000209211 -0.000213285 0.000409920 -0.001038097 0.001056792 -0.000147537 0.000133595 0.000568371 0.000604745 -0.000824801 -0.000506646 -0.000327551 0.001333144 0.001224208 0.001731497 -0.000324920 -0.001464568 0.000205203 0.000099927 0.001090909 -0.000046597 0.001569327 -0.000305388 -0.000008810 -0.001094755 -0.000019121 -0.003623847 -0.002319864 -0.002473245 -0.001132704 0.000769997 0.006077288 0.000866818 0.001066745 0.001409821 0.000118468 0.000508008 0.000320642 0.000148029 -0.003871868 0.000225627 0.001192544 -0.000931190 -0.000534121 -0.001709218 0.000276157 0.000045235 -0.000094214 -0.000187581 -0.000276880 -0.000029731 -0.000337122 -0.000263289 -0.000222872 -0.000218657 0.000115616 0.000123764 0.000686078 0.000763985 0.000879868 -0.000244246 -0.000464796 0.000338290 0.000194373 0.000693684 -0.000100748 0.001120769 -0.000391344 -0.000166441 -0.001149376 0.000105388 0.000106873 0.000130738 0.000224849 0.000002965 -0.000055252 0.000040915 -0.000056539 0.000011640 -0.000035505 0.000028849 -0.000028020 0.000112207 0.000177355 0.000067847 -0.000050220 -0.000002900 0.000137861 0.000168373 0.000009440 -0.000068445 -0.000004504 0.000024918 0.000074643 0.000034825 -0.000011611 0.000064368 -0.000066400 -0.000015105 -0.000091888 0.000024683 0.001674974 0.000975549 0.001369570 0.001154897 -0.000397469 0.000646390 0.000024179 0.000131407 -0.000544646 -0.000019566 -0.000761965 0.000325008 -0.000207382 0.001104957 -0.000117191 -0.001100876 0.000162886 -0.000048329 0.000972558 -0.000044393 -0.000346379 0.000061619 -0.000068659 0.000191616 -0.000050187 -0.000702908 0.000083920 -0.000043792 0.000248765 -0.000024752 -0.000074619 -0.000005775 -0.000185814 0.000241852 0.000041164 -0.000004957 -0.000067143 -0.000050147 0.000265239 0.000053706 0.000238543 -0.000136764 0.000170997 -0.000554097 0.000012902 0.000047901 0.000133147 0.000137825 0.000179514 -0.000057319 -0.000009438 0.000089525 0.000149323 0.000136777 -0.000039639 0.000011079 -0.000142677 -0.000115673 -0.000100293 0.000061114 0.001643944 0.000344665 0.001059359 -0.004130210 -0.000001284 -0.000439208 -0.001324571 -0.002494991 0.000990162 0.001132631 0.000243227 -0.001085746 -0.001499251 -0.002875611 -0.000187864 -0.000206647 -0.000236037 -0.000479065 0.000261094 0.000244176 0.000307674 0.000203556 0.000850436 -0.002173130 -0.000300700 0.000106593 -0.000339318 -0.000205040 0.000165770 0.000266727 -0.000277902 0.000177001 -0.000156064 0.001271005 -0.000007632 0.000454068 0.000748569 0.000909021 -0.001352000 -0.000487508 -0.000169071 0.000309107 -0.000141471 0.000902074 -0.000080944 -0.000035924 0.000013060 0.000017649 0.000226231 -0.000019899 0.000067201 -0.000351903 -0.000169303 -0.000627692 0.000176888 0.000000213 0.000169607 0.000104972 0.000187893 -0.000019531 0.000063607 -0.000081460 -0.000073908 -0.000241631 0.000034209 0.000089601 -0.000422080 -0.000227217 -0.000496385 0.000162629 -0.000009028 -0.000205954 -0.000016350 -0.000248675 0.000057897 0.000038754 0.000056375 0.000089377 -0.000121934 -0.000041284 0.000085210 0.000045499 0.000160168 -0.000325234 -0.000047893 0.000000514 -0.000019494 0.000045886 -0.000014737 0.000006141 0.000241440 -0.000193734 0.000246214 -0.000799110 -0.000041274 -0.000228356 0.000237691 -0.000282821 0.001430174 -0.000028631 0.000229367 0.000002754 0.000272755 -0.000695172 -0.000046566 0.000027276 -0.000354239 -0.000159603 -0.000417282 0.000193994 0.000372239 0.000151285 0.000571225 -0.001576875 -0.000240196 0.000014628 -0.000199093 -0.000112670 -0.000327602 0.000099199 -0.000032954 -0.000068808 -0.000152845 0.000136045 0.000051642 -0.000005297 0.000128056 0.000111082 -0.000016454 -0.000073992 -0.000027165 -0.000147974 -0.000140706 0.000117977 0.000088162 0.000011278 -0.000011647 -0.000022407 -0.000063583 0.000005224 0.000041636 0.000079424 0.000177183 -0.000149311 -0.000054352 0.000003113 -0.000073472 -0.000026617 -0.000019563 0.000027188 -0.000026089 0.000112897 -0.000200761 0.000099911 -0.000209911 -0.000106009 0.000197778 0.000130842 0.000195172 -0.000223537 0.000089588 -0.000830162 0.000097525 -0.000015573 0.000970502 0.000024185 -0.000116374 -0.000054973 -0.000024312 0.000105330 0.000038346 -0.000078408 0.000122188 -0.000133579 0.000080626 -0.000001020 0.000054836 -0.000069219 0.000020788 -0.000036935 -0.000035459 0.000323469 0.000012006 -0.000002295 -0.000334838 -0.000008640 0.000106214 0.000042799 -0.000017978 -0.000104576 0.000008174 -0.000088233 -0.000008879 -0.000015074 0.000044493 0.000060302 -0.000107867 0.000137929 -0.000175155 0.000128967 -0.000003622 -0.000102251 -0.000069205 0.000058149 0.000088560 -0.000001608 0.000073449 0.000011294 -0.000004830 -0.000051791 0.000011553 0.000512155 -0.000459855 0.000171779 -0.001773076 -0.000109847 0.000860964 0.000104839 0.000038708 -0.001821454 0.000170236 -0.000718874 0.000120821 -0.000067423 0.002564854 -0.000031008 -0.000239919 0.000218744 0.000059995 0.000420281 -0.000057060 0.000034390 -0.000337964 0.000296767 0.000113967 -0.000017240 -0.000323040 0.000040162 0.000131710 0.000230921 0.000214577 -0.004447499 0.000140530 0.000484727 -0.000037436 0.000023271 -0.001204275 0.000357215 0.000053191 0.000926884 -0.000327127 0.002720751 0.000012540 -0.000077855 -0.001628118 0.000085412 -0.000061376 -0.000338583 -0.000093664 -0.000006119 0.000059446 -0.000015007 0.000209172 -0.000270357 -0.000007799 -0.000010008 -0.000100215 -0.000145938 0.000129247 -0.000004503 0.067138595 0.008208538 0.059668728 0.031673275 -0.001476141 0.194828491 -0.004292982 0.001862418 -0.198279118 0.466014031 0.001351360 0.014860327 0.014417678 -0.056490140 0.072131372 0.000751688 -0.000229639 0.000799534 0.002518247 -0.001169007 0.000062376 -0.000700097 0.000000029 -0.000933476 0.000158887 -0.000576611 0.000306741 -0.000775220 -0.001223653 0.000470667 0.000005038 -0.000020805 -0.000082078 0.000027446 0.000089603 -0.000098915 0.000138520 -0.000043233 -0.000296645 0.000113934 -0.000108516 0.000078019 -0.000131073 -0.000223004 0.000145323 0.001115184 0.000480389 0.000590782 0.000873816 -0.000107449 0.000292725 0.000012606 0.000123368 0.000675667 -0.000143076 0.000887473 0.000364851 0.000284738 0.001595701 0.000528519 0.000476391 0.000891316 -0.001244635 -0.002651690 0.002906166 -0.000433111 -0.000267707 -0.000051904 -0.001313401 0.000709708 -0.000935901 -0.000681469 -0.000863736 -0.002458715 0.000898952 -0.000482186 -0.000062775 -0.000780701 0.000577433 0.001019843 -0.000659574 -0.000194335 -0.000654502 -0.001783199 -0.000716948 -0.001071250 0.000162197 -0.001090185 -0.005368923 0.000890900 -0.000932731 -0.000170590 -0.000454734 -0.001737142 0.000079178 0.000057565 0.000043707 -0.000092713 -0.000091419 0.000256632 0.000201220 0.000464537 -0.000158975 -0.000293060 0.000641859 -0.000225520 -0.000247821 0.000029980 -0.000655297 -0.000355443 0.000011213 -0.000100627 0.000126488 0.000297686 -0.000458617 -0.000206795 -0.000405475 0.000263902 0.000304841 -0.000756382 0.003443704 -0.002218806 0.005662209 0.011715271 -0.006605000 0.001853694 -0.001304089 0.002350997 0.004073362 -0.001792436 0.003494825 -0.002000081 0.006590085 0.014898252 -0.009762406 -0.000107116 -0.000145200 -0.000883836 -0.000497227 -0.000479727 0.000550185 0.000194507 -0.000660703 0.000871925 0.000979892 0.000348921 -0.000041944 -0.000374059 0.001392091 0.000162547 -0.000092099 0.000018532 -0.000024340 -0.000219325 -0.000056692 -0.000087033 0.000104191 0.000000591 -0.000174014 0.000079024 0.000032478 0.000000757 -0.000010764 0.000086496 0.000016350 -0.000156669 -0.000027214 -0.000121958 -0.000408410 0.000122361 -0.000085916 -0.000038327 -0.000036572 -0.000238788 0.000051050 -0.000013823 -0.000024707 -0.000030819 -0.000058737 0.000060168 -0.002586081 -0.000610130 -0.001343554 -0.005416048 0.001057632 0.000473452 0.000527497 -0.000051859 0.000917987 -0.000019744 0.001108381 0.000532305 0.000518284 0.001962788 0.000013750 0.002783993 0.000594797 0.001157035 0.004793797 -0.001000427 -0.002021293 -0.000657412 -0.000553570 -0.003733585 0.000862882 -0.000664761 0.000196538 -0.000804462 -0.001353962 0.000349172 -0.000071708 0.000028110 -0.000048301 -0.000177073 0.000092559 0.000266395 0.000104959 0.000078600 0.000436156 -0.000092175 -0.000126247 -0.000089899 -0.000003693 -0.000186703 0.000005319 -0.000089545 -0.000020027 -0.000042073 -0.000176601 0.000037949 0.000270893 0.000078300 0.000055807 0.000514447 -0.000112494 0.000148491 -0.000047216 0.000035519 0.000306383 -0.000118705 -0.000031024 -0.000064112 0.000026353 -0.000038615 -0.000004256 -0.000001752 -0.000010590 0.000003073 -0.000020336 0.000005312 0.000044148 0.000020332 0.000113800 0.000064973 0.000039747 0.000133485 0.000020402 0.000156668 0.000261593 -0.000020606 -0.000004386 0.000001417 0.000018242 -0.000015471 0.000017822 -0.000037307 -0.000063652 0.000051013 -0.000062240 0.000007074 -0.000020063 -0.000181725 -0.000024272 -0.000045682 -0.000080877 0.000043860 0.000114367 -0.000031314 0.000096071 -0.000009421 0.000031481 0.000127565 0.000075913 0.000047073 0.000088798 -0.000047903 0.000111439 -0.000163442 -0.000111583 0.000022067 0.000011618 0.000046763 -0.000035371 0.000016561 -0.000001786 0.000004072 -0.000042046 -0.000059506 -0.000010040 -0.000069619 0.000046436 0.000046803 0.000079395 0.000077409 0.000028384 0.000003362 0.000011722 0.000013069 0.000002492 0.000013105 0.000059840 0.000042846 0.000029122 0.000106627 -0.000004657 0.000014348 0.000019446 0.000032393 0.000026078 0.000016734 0.000012173 -0.000005156 0.000027403 0.000021628 -0.000001907 -0.000017021 0.000007173 -0.000026990 -0.000028712 0.000006176 -0.000032846 0.000054240 -0.000133936 -0.000063848 -0.000028708 -0.000063409 -0.000230252 0.000035409 -0.000182474 0.000020191 -0.000073250 0.000043942 -0.000147263 -0.000129096 -0.000002081 0.000005709 -0.000000498 -0.000093136 -0.000014101 -0.000057525 -0.000019170 -0.000035074 0.000016018 -0.000026338 -0.000001654 0.000018085 0.000050174 0.000059211 0.000037611 0.000047348 -0.000009065 0.000021164 -0.000012584 -0.000015349 0.000016618 -0.000004298 -0.000003867 0.000012848 -0.000003909 0.000002540 0.000014489 -0.000009178 0.000021020 0.000026186 -0.000006806 -0.000003536 0.000010815 -0.000017900 -0.000009609 -0.000000094 -0.000005971 -0.000008034 0.000005764 -0.000006636 -0.000001242 0.000016081 -0.000019633 0.000025751 0.000028663 -0.000011960 -0.004095253 0.000504552 -0.015176742 -0.046059702 0.025027659 -0.005396083 0.002866260 -0.018070141 -0.025031644 0.017781944 -0.000032882 0.001489668 0.009386355 0.016198129 -0.000689647 0.002460578 0.000994879 -0.011583162 0.027698098 -0.010589700 0.005574895 -0.001051452 0.005931119 0.013529889 -0.011180899 -0.003696511 -0.001074786 -0.003796854 -0.019543925 -0.004746027 -0.000405504 0.000063336 -0.000296614 -0.000745673 0.000441731 -0.000385576 -0.000833444 -0.000665534 -0.000811528 -0.000069381 -0.000430693 0.000242550 0.000333571 -0.000655434 0.000317278 -0.000569656 0.000206742 -0.000284081 -0.000673336 0.000157177 0.002519360 0.000836140 0.000853110 0.003598078 -0.000591939 0.000788608 0.000726371 0.000014343 0.001696969 -0.000304016 -0.001904764 -0.001975768 0.000281357 -0.001996726 -0.000032143 -0.002510828 -0.001331908 -0.000654847 -0.002932331 0.000208842 -0.002896010 -0.000934468 -0.001251133 -0.004083873 0.000566191 0.003364878 0.002939395 0.000452153 0.003989988 0.000050472 0.002646396 0.001139254 0.000291759 0.002592133 -0.000259864 0.000062095 0.000100967 0.000542527 0.000433772 0.000117026 -0.001869639 -0.004548098 -0.000374942 -0.003089601 -0.000789795 -0.004008263 0.002314422 -0.000301185 -0.001998021 0.001017608 0.004569691 0.002500330 -0.002220589 0.002354080 -0.001035679 0.004265673 0.002752213 -0.000676176 0.000963890 -0.000066214 -0.001502154 -0.002430453 0.000682004 0.000012347 -0.000112373 -0.001489299 0.000956947 0.000477386 -0.000604081 0.000311161 -0.000384350 0.000953315 0.000372541 0.000217632 0.000695270 0.000832271 0.002061509 -0.000429776 0.000810363 -0.000625393 -0.000786347 -0.004160085 0.000720467 -0.001192250 0.000410064 -0.000038827 0.000716124 0.000049358 0.000259148 0.000212119 0.000759427 -0.000550443 -0.000030925 0.000344833 -0.000308186 -0.001019685 -0.000274119 0.000464817 -0.000407791 0.000169011 -0.000432045 0.000404412 -0.000656677 -0.000858119 0.000251664 0.000471973 0.000175700 0.000261123 0.000602159 -0.000054686 0.001050788 -0.000054140 0.000964225 0.001471364 -0.000205983 -0.000018639 -0.000064915 0.000000656 0.000009920 -0.000036897 -0.000320658 -0.000000603 -0.000197690 -0.000436735 0.000082499 -0.000337562 0.000071492 -0.000424151 -0.000547224 0.000075102 -0.001131336 0.000027869 0.001276586 -0.001094485 0.000214247 -0.001990981 -0.000445081 -0.001667947 0.000824645 -0.000144845 -0.001823630 -0.002786109 -0.000174428 0.000188942 0.000039618 -0.000255306 -0.000097216 0.000027487 -0.000086648 -0.000011357 0.000313696 -0.000063290 0.000142469 0.000283626 0.000021213 0.000081989 -0.000222789 0.000042636 0.000002760 -0.000054967 0.000540677 0.000288729 -0.000146601 0.000154223 0.000006264 -0.001117648 -0.000932653 0.000267342 -0.000235070 0.000039887 -0.001333654 -0.000480839 0.000331445 -0.000133710 0.000105450 -0.000108682 0.000003846 -0.000066955 0.000064563 -0.000014625 0.000458418 -0.001034522 0.000077769 0.000031498 -0.000041691 -0.000043113 -0.001347329 0.000314880 -0.000324580 0.000037456 0.000395601 0.000544663 -0.000283301 0.000154912 -0.000163002 -0.000280315 0.000323403 0.000075203 -0.000102590 0.000334352 0.000434918 0.000848429 -0.000103773 0.000933401 0.000095161 0.000330681 -0.000533591 0.000058472 -0.000033581 -0.000662189 -0.000187962 -0.002459515 0.000302890 -0.000843007 0.000286821 -0.000712825 0.001062831 -0.000762895 0.000354814 0.000073643 -0.000023897 -0.000040689 -0.000038223 -0.000023589 -0.000030749 -0.000203557 0.000034090 0.000046682 -0.000088647 0.000052835 -0.000332090 0.000006712 0.000107665 -0.000164020 0.000080549 0.000034665 -0.000029368 0.000007471 0.000037034 -0.000025982 0.000046286 0.000099767 0.000054054 0.000086432 0.000051514 0.000138081 0.000084995 -0.000026835 0.000141933 -0.000014741 -0.000028639 0.000033781 0.000005304 -0.000019071 0.000034452 0.000070712 -0.000183889 -0.000016151 -0.000037448 -0.000062156 0.000191101 -0.000177950 -0.000026995 0.000036378 -0.000079242 -0.000005033 -0.000018734 0.000017620 -0.000003067 -0.000001434 -0.000019989 -0.000038877 0.000020032 -0.000019538 -0.000003978 0.000085068 0.000035408 0.000044202 0.000106926 -0.000006898 0.000013122 0.000034798 -0.000028274 0.000004464 0.000004979 0.000021752 0.000029689 -0.000005285 0.000012599 0.000009292 0.000045445 -0.000000993 0.000038955 0.000062332 -0.000009236 -0.000032829 -0.000062373 0.000026461 -0.000022203 -0.000013157 0.000085522 0.000016499 0.000038879 0.000108465 -0.000017293 0.000049251 0.000006735 0.000032562 0.000060620 -0.000006384 -0.000303855 0.000243386 0.000451079 -0.000511337 0.000837758 -0.000629316 0.000132987 0.000131681 -0.001355501 0.000834551 0.000656377 -0.000089040 -0.000887714 0.002015989 -0.001181130 0.000559866 0.000076906 -0.002470434 0.001913172 -0.004337214 -0.000246220 -0.000223287 0.002396620 0.000988783 0.001214477 -0.000583282 0.000022968 -0.000870060 -0.000915152 -0.001427948 -0.000034367 -0.000089407 -0.000345034 -0.000441151 -0.000305472 0.000147494 -0.000033705 -0.001126568 0.000019122 -0.000646816 0.000434496 -0.000011919 -0.000701890 0.001144989 -0.000631795 0.000044222 -0.000061388 0.000648325 0.000343514 0.000321972 -0.000034243 -0.000032521 0.000323160 -0.000047430 0.000163504 -0.000339575 0.000114094 -0.000483278 -0.001076005 0.000303746 -0.000007019 -0.000053633 0.000109592 0.000053136 -0.000005795 0.000141410 0.000066604 -0.000306800 0.000293544 -0.000464351 0.000146330 0.000076628 -0.000487840 0.000209505 -0.000447868 -0.000054881 -0.000066511 0.000162035 -0.000112705 0.000247961 0.000260425 0.000101959 -0.000350052 0.000813493 -0.000350598 -0.000071748 0.000056063 0.000244304 -0.000123675 0.000116083 -0.000817394 -0.000017362 0.000850503 -0.001961890 0.000413984 0.000119362 0.000028584 -0.001492953 -0.001097399 -0.001533176 -0.000881856 -0.000072297 0.000398312 -0.002077342 -0.003227285 -0.000004454 0.000069947 -0.000345733 -0.000010602 -0.000087596 0.000052194 -0.000103472 0.000088294 0.000066602 -0.000116265 -0.000213380 0.000025652 0.000055546 -0.000636279 0.000274075 -0.000086718 0.000125744 -0.001302604 -0.000589197 -0.000669253 -0.000451899 -0.000293119 -0.000894125 -0.001267116 -0.000340450 -0.000105232 0.000088613 0.001091138 0.000191608 0.000890058 0.000035460 0.000050433 -0.000085336 0.000061464 -0.000062845 0.000002350 -0.000000627 -0.000007294 0.000027794 -0.000016737 0.000006752 0.000045698 -0.000020316 -0.000004957 0.000020326 0.000032544 0.000055580 -0.000066831 0.000032715 -0.000000346 0.000064841 -0.000019651 -0.000114420 0.000144160 -0.000150898 0.000109765 -0.000010784 -0.000168914 0.000274029 -0.000189103 0.000580373 -0.000338578 0.000126234 0.000297320 -0.000125706 -0.000118620 -0.000067708 0.000037996 0.000411416 -0.000140957 0.000731914 -0.001858738 -0.000164714 0.000217971 -0.000025868 -0.000400129 0.000642320 0.000246068 -0.000095108 -0.000117366 -0.000844983 0.000886358 0.000150259 -0.000375140 0.000131480 -0.000117106 0.000347744 -0.000052095 -0.000121219 0.000151489 0.000518744 -0.000419783 0.000143022 0.000860121 -0.000223888 0.000756905 -0.000855673 0.000034160 0.000592848 -0.000238863 0.000146831 0.000037875 0.000027111 0.000026260 -0.000095191 -0.000011303 0.000547289 0.000024059 -0.000498293 0.000100306 0.000184198 0.000811796 0.000057254 -0.000291297 0.000214038 0.000117894 -0.000036433 0.000013794 0.000031542 -0.000042740 0.000034321 -0.000532935 -0.000287940 0.000216805 0.000298003 -0.000277823 0.000691424 0.000333053 0.000588600 -0.000173160 -0.000007392 -0.000257137 0.000006958 0.000231039 -0.000230888 -0.000249419 0.000023245 0.000038586 -0.000164972 -0.000001623 0.000285203 0.000054794 -0.000144067 0.000056886 0.000051977 -0.000117084 0.000002173 0.000131396 0.000023188 -0.000013123 0.000008784 -0.000077759 0.000058632 0.000028889 -0.000031295 -0.000043920 0.000025982 -0.000016655 -0.000040102 0.000022622 0.000011755 -0.000090470 0.000059339 0.000041438 -0.000032197 -0.000839416 0.002038710 0.000014491 -0.001465911 0.000894685 -0.001141940 0.001829743 0.000131677 -0.002227918 0.000814428 0.000062565 -0.000084902 0.000343812 -0.000159997 -0.000090432 0.000032567 0.000027174 -0.000042214 0.000037416 0.000109648 0.000003573 0.000023451 -0.000014200 -0.000027686 0.000048837 0.000147680 -0.000000968 0.000082716 0.000224441 0.000041551 -0.000043853 -0.000020263 -0.000034988 0.000003464 -0.000042884 -0.000105204 0.000022788 -0.000032197 -0.000315709 -0.000061659 0.000053965 0.000305956 -0.000031908 -0.000195637 0.000440134 -0.000079977 -0.000140169 0.000741634 0.000037406 0.000447116 0.000198694 0.000165809 0.000043280 0.000430290 -0.000031837 0.000178676 -0.000001081 -0.000782876 0.000149135 -0.000656381 0.000126316 -0.000030064 0.000740964 0.000447533 0.000310886 0.000279418 0.000085259 0.000535845 0.000802319 0.000187313 0.000108128 -0.000052204 -0.000339343 0.000144114 -0.000381235 0.000127187 -0.000492321 -0.000042892 0.000224262 -0.000246163 0.000705421 -0.000886152 -0.000095653 0.001343574 -0.000413331 0.000106601 -0.000116747 -0.000214675 0.000193117 -0.000005293 0.000413009 -0.001100217 0.000041217 0.000734121 -0.000535338 0.000396009 -0.000573725 0.000004666 0.000768094 -0.000306692 -0.000245643 0.000508445 -0.000245788 -0.000356870 0.000265452 -0.000100695 -0.000154224 -0.000074995 -0.000566123 -0.000204041 0.000035944 -0.000135659 -0.000015990 0.000021001 -0.000202003 -0.000103623 0.000132740 0.000123490 -0.000177609 0.000200818 0.000365515 0.000077009 0.000083455 0.001331944 -0.000137316 0.000090070 -0.000312823 -0.000109801 0.000468167 -0.000315511 -0.000011330 0.000643518 0.000057114 0.000008100 0.000615748 0.000007987 0.000225842 0.000252651 0.000208023 0.000245307 -0.000001317 0.000027349 -0.000018882 -0.000014090 0.000032957 0.000039056 0.000043195 0.000035278 0.000152475 0.000067680 -0.000095287 -0.000098812 -0.000010627 -0.000402355 -0.000079938 0.000005068 -0.000090550 -0.000089970 -0.000052215 -0.000102429 -0.000024148 0.000166693 0.000141854 0.000009725 0.000211133 -0.000032560 0.000017146 0.000013419 -0.000111707 0.000030748 -0.000005769 0.000001581 0.000033344 -0.000001429 0.000001338 -0.000028197 -0.000001647 -0.000005104 -0.000086774 -0.000007340 -0.000025377 0.000009266 -0.000027042 -0.000083992 0.000004827 -0.000014466 -0.000004988 0.000002570 -0.000031049 -0.000010903 -0.000002576 0.000013455 0.000024881 0.000009514 0.000015881 -0.000165951 -0.000153669 -0.000017439 -0.000577116 -0.000083240 -0.000051212 0.000119479 0.000033305 -0.000119002 0.000134072 0.000083258 -0.000204586 -0.000217969 0.000114168 -0.000205130 0.000048113 -0.000154909 -0.000129488 0.000099029 -0.000208940 0.000022622 -0.000039935 -0.000049386 0.000012352 -0.000054401 0.000013268 -0.000009271 -0.000004863 -0.000041805 -0.000006022 0.000037385 -0.000055489 -0.000025303 0.000092020 -0.000048586 0.000003704 -0.000058786 0.000007470 0.000048693 -0.000071057 -0.000051341 0.000110454 0.000078911 -0.000079311 0.000114493 -0.000012688 -0.000027406 -0.000022383 -0.000055409 -0.000022445 -0.000022165 -0.000019733 -0.000002550 -0.000066787 -0.000024919 0.000012469 0.000009134 0.000033335 0.000059118 0.000010425 -0.000017601 0.000550593 0.000186901 -0.000081974 0.000599383 0.000299956 -0.000223923 0.000263245 0.000868185 -0.000268031 0.000057309 0.000592254 0.000211537 -0.000274229 0.000654061 0.000043158 -0.000082713 0.000074946 0.000160788 -0.000083392 -0.000084150 0.000365824 0.000062275 -0.000315791 0.000292836 -0.000015134 -0.000011208 0.000089143 0.000166088 -0.000074816 0.000045644 -0.000237425 -0.000134635 0.000118750 -0.000255553 -0.000032218 0.000239558 -0.000086940 -0.000360831 0.000262377 0.000099542 -0.000166199 -0.000136003 0.000105331 -0.000169212 0.000012165 -0.000015344 -0.000003801 -0.000000137 -0.000022316 -0.000038193 0.000149470 0.000111379 0.000015352 0.000105006 0.000018754 -0.000026266 -0.000038196 0.000025596 -0.000028263 0.000011714 0.000054504 0.000017785 0.000035257 0.000039164 0.000005563 0.000075850 0.000096744 0.000118847 0.000068015 -0.000025500 0.000050196 0.000063331 -0.000003925 0.000041060 -0.000010096 0.000038661 -0.000006765 -0.000045925 0.000030525 -0.000028711 0.000070377 0.000016032 -0.000083914 0.000071269 -0.000018105 0.000002401 0.000006977 -0.000019764 0.000001895 -0.000093525 0.000203346 0.000071824 -0.000170666 0.000174999 0.000128220 -0.000240159 -0.000122089 0.000147307 -0.000216240 -0.000028551 0.000161773 0.000037661 -0.000094061 0.000121164 -0.000043783 0.000074636 0.000100815 0.000043819 0.000047664 -0.000074471 0.000299030 0.000045544 -0.000281348 0.000282374 -0.000025460 0.000076109 0.000055308 0.000018854 0.000047651 0.000029921 -0.000029805 0.000003602 0.000078304 -0.000031405 -0.000003723 -0.000008143 -0.000023140 -0.000042797 0.000004995 0.000004888 -0.000038405 0.000027158 0.000061602 -0.000028489 0.000006959 0.000015148 0.000002698 0.000010593 0.000010029 -0.000033913 0.000049320 -0.000005668 -0.000087983 0.000039151 -0.000007080 -0.000002547 0.000017210 0.000010367 0.000000023 0.000046717 0.000006576 0.000013700 0.000166107 -0.000061151 -0.000097821 -0.000091181 -0.000080032 -0.000055754 -0.000051916 0.000090473 -0.000189215 0.000178835 -0.000220137 0.000058211 0.000031066 -0.000000644 0.000040258 0.000018134 0.000013469 -0.000030123 0.000058913 -0.000001513 -0.000104491 0.000056408 0.000027218 -0.000008123 -0.000003215 0.000059496 -0.000014717 -0.000037272 0.000068445 -0.000083314 0.000045057 -0.000019825 -0.000027925 0.000028175 -0.000034205 -0.000016076 0.000008014 -0.000003994 0.000003071 0.000027037 -0.000004927 0.000006290 -0.000030499 0.000069058 0.000006047 -0.000117671 0.000069490 0.000025230 -0.000048171 0.000036993 0.000035416 -0.000016011 -0.000010548 0.000012220 -0.000019893 0.000003380 0.000002885 0.000216610 -0.000033246 -0.000009517 0.000145511 -0.000070428 0.000034497 0.000567210 -0.000279443 0.000186098 -0.000076853 0.000699668 -0.000144732 0.000266329 -0.000307869 0.000076540 -0.000637093 0.000119268 0.000094867 -0.000258712 0.000036972 0.000284262 -0.000294471 0.000030894 0.000251355 -0.000107243 -0.000179734 -0.000148863 0.000084370 -0.000065636 0.000010077 -0.000363863 0.000161003 0.000726872 -0.000581433 0.000069457 -0.000730632 -0.000318529 0.000291511 -0.000661691 0.000168528 -0.000312232 -0.000175608 -0.000643459 0.000479742 -0.000189416 0.000370002 0.000576175 0.000061614 0.000242479 -0.000012719 -0.000004864 0.000195963 -0.000039679 -0.000158874 0.000066042 0.000043463 -0.000025639 0.000047946 0.000092355 -0.000033580 0.341205447 0.080883242 0.048932647 0.145774624 0.061176600 0.145916045 -0.000095915 0.000009354 0.000067798 0.070075149 -0.000072563 0.000036623 0.000022090 -0.009867359 0.046431916 -0.000081855 -0.000005302 0.000041027 -0.062620393 0.075637909 0.000731631 -0.000070672 -0.000110940 -0.071624728 0.010066469 0.000183054 0.000040100 -0.000030057 0.010072003 -0.056042169 0.000426561 0.000103495 -0.000150973 0.057447363 -0.068941323 0.009677855 -0.008795712 -0.028941347 -0.001068268 -0.000501266 -0.002161060 -0.002541421 -0.009346632 -0.000262343 -0.000539249 -0.004807936 -0.007250547 -0.016182468 -0.000725293 0.000230436 -0.001393237 0.000068361 -0.000208404 0.008907804 0.003220003 -0.000421562 -0.000553790 0.000112704 -0.005672157 0.002175511 -0.002278257 0.000144730 0.000744469 -0.022765016 -0.007940058 -0.000223887 -0.000510508 -0.001095545 -0.000361330 -0.001102220 -0.000013377 0.000275622 -0.000419254 0.007635648 0.004356146 -0.000087126 -0.000283450 -0.000010311 0.028754280 0.002632469 -0.000383416 0.001068410 0.003526519 -0.004966467 -0.001364992 0.000704173 0.000710267 -0.001151683 -0.001474241 0.005949615 0.003405530 -0.001266811 -0.004180854 0.001785425 -0.001285911 0.004616111 -0.001219496 -0.003682242 -0.003118052 -0.002113406 0.003607396 0.000836500 -0.003022427 -0.002266689 0.006436362 0.007926983 -0.001749594 -0.006471365 -0.002085620 -0.002525493 -0.000000901 -0.000004142 0.000022781 0.000728399 0.000906534 0.000062250 0.000123464 -0.000029073 0.000882386 -0.003828217 0.000215346 0.000010203 0.000068304 0.000434577 0.001393493 -0.000055070 0.000051459 0.000135921 0.000920723 0.000722214 0.000104795 -0.000032419 -0.000072891 0.000671082 -0.003653197 0.000184319 -0.000107927 -0.000336777 -0.000603242 0.001056264 -0.000227801 -0.000012396 0.000006382 -0.000280113 -0.000030948 -0.000137578 -0.000022258 0.000105054 0.000358885 0.000176811 -0.000236778 0.000114753 0.000209826 0.001330864 0.000134360 -0.325163638 -0.076866567 -0.133425643 0.000159763 0.000367020 -0.075792910 -0.048837335 -0.054370801 0.000201326 -0.000673616 -0.138367967 -0.053417010 -0.134839517 0.000057678 0.000094433 -0.028549397 0.005079577 0.014967150 -0.000006906 -0.000278083 -0.002508429 0.004206236 0.008884484 -0.000060570 0.000069074 -0.005574327 0.005124446 0.015985961 -0.000008049 0.000070912 0.000019497 -0.001633027 0.004062074 0.000041543 0.000022077 0.000541590 0.004600365 -0.002798052 -0.000002923 0.000047324 0.001937665 -0.002014125 -0.001234366 -0.000062455 0.000035338 0.000273651 0.000738463 -0.000596080 0.000032285 0.000018197 -0.000200761 -0.003574014 0.001438725 0.000020362 -0.000018816 -0.001788849 -0.001143258 -0.000673061 -0.000008360 -0.000026165 0.000245522 0.000205522 0.000017716 -0.000001269 0.000003248 0.000069772 0.000101602 -0.000041401 0.000000359 0.000000974 -0.000165946 0.000033433 0.000186439 0.000000935 0.000000026 -0.000715852 -0.000374407 -0.000226578 0.000001100 -0.000014498 -0.000095781 -0.000233200 -0.000033437 -0.000000594 0.000007369 0.000038063 0.000245294 -0.000022001 -0.000001545 0.000003185 0.000835525 0.001411218 0.004259815 -0.000011422 0.000005253 0.000064551 -0.000279854 0.000667658 0.000003004 -0.000012335 -0.000350457 -0.000082776 -0.000599736 0.000017965 0.000002800 0.000087702 -0.000338106 -0.001202358 0.000005744 0.000001798 -0.000017571 -0.000325123 0.000044195 -0.000000122 0.000003641 0.000265641 0.000280816 -0.000152949 0.000000753 0.000001094 -0.000116419 -0.000203557 -0.000365262 0.000002831 0.000000846 -0.000004528 0.000060054 -0.000065952 0.000001611 -0.000003973 -0.000354434 -0.000213669 0.000138043 0.000001539 -0.000006073 0.000054680 -0.000030061 -0.000264691 0.000004686 -0.000000001 -0.000040581 0.000012491 -0.000101121 -0.000000558 0.000001357 0.000061537 0.000050735 0.000097265 -0.000003535 -0.000000173 0.001395432 -0.000525568 -0.001900745 -0.000003584 0.000002081 -0.000228196 0.001305484 -0.001611443 -0.000000968 0.000005924 -0.000650811 -0.001246963 -0.002908530 0.000000473 0.000003314 0.000057964 -0.000003556 -0.000016329 -0.000000851 0.000000209 -0.000019456 0.000039647 -0.000044633 -0.000000388 0.000001565 -0.000072877 -0.000013832 0.000015041 0.000002457 -0.000000845 0.000014685 -0.000006075 -0.000038063 -0.000000527 -0.000000092 -0.000003356 0.000018202 -0.000011876 -0.000000273 0.000000830 -0.000060100 -0.000008129 0.000023878 0.000001188 -0.000001032 0.000014800 -0.000047400 -0.000142834 0.000000396 0.000000235 -0.000004285 0.000047102 -0.000051816 -0.000000018 0.000000831 -0.000037441 0.000015836 0.000091145 0.000001106 -0.000000547 -0.001515807 -0.001113057 -0.001857839 0.000366413 -0.000090287 0.001343343 -0.003639452 0.000129916 -0.000346794 -0.000563607 -0.004934971 0.000654280 0.003298025 -0.001270680 -0.000611972 -0.003088656 0.001113201 0.001479210 0.000189094 0.000206772 -0.004327944 0.001304208 0.002570686 0.000238253 0.000280033 0.000249035 0.000320954 -0.000014477 0.000006223 -0.000103814 0.000067391 0.000003224 0.000016967 0.000024829 0.000022908 0.000006129 0.000004116 0.000025399 -0.000033158 -0.000095658 0.000020106 0.000030159 -0.000011276 -0.000003020 -0.000057640 0.000834555 0.000800086 0.000492989 -0.000014110 0.000069120 -0.004130535 -0.001335752 -0.002455251 0.000021634 -0.000112604 -0.001194931 -0.001583810 -0.000626488 0.000010019 -0.000070238 0.001037730 0.002049337 0.000338894 -0.000024945 0.000050373 0.002491150 0.001181713 0.001577933 -0.000046868 0.000070491 0.003860554 0.002117789 0.002547982 -0.000056526 0.000095529 -0.003060227 -0.002336517 -0.001570325 0.000061815 -0.000071441 -0.001924397 -0.000763655 -0.000777459 0.000045307 -0.000057293 -0.000579222 -0.000361743 -0.000619018 0.000011367 0.000006753 0.002951293 0.002000853 0.000893596 -0.000045474 0.000021812 0.000921056 -0.001198825 0.000267900 -0.000034567 0.000076372 -0.000050917 -0.000030353 0.000389632 0.000021209 -0.000077614 -0.000473254 -0.000277718 -0.000160069 0.000005769 0.000001649 -0.000095978 0.000202419 -0.000078075 0.000009848 -0.000019802 0.000056525 -0.000057710 -0.000065333 -0.000012948 0.000040212 -0.001269004 0.000333180 -0.000110351 0.000012942 0.000007974 0.000248203 0.000441260 0.000175824 0.000001678 -0.000025084 -0.000112618 -0.001032230 -0.000144966 -0.000004476 0.000023164 -0.000485265 -0.000441768 -0.000108886 0.000006621 0.000000613 0.000028968 0.000293153 -0.000005279 0.000004402 -0.000015034 -0.000023389 0.000006588 -0.000056352 -0.000004317 0.000016863 0.001143688 0.000038343 0.001024944 -0.000008665 0.000017646 -0.000550197 -0.000235254 -0.000307532 0.000010826 -0.000014107 -0.001599932 -0.000400602 -0.001420975 0.000022142 -0.000020900 -0.000011530 0.000006292 0.000047527 0.000001974 -0.000003096 0.000395862 0.000135761 0.000191221 -0.000009297 0.000011494 0.000614556 0.000111436 0.000562248 -0.000009637 0.000004264 0.000139510 0.000012438 -0.000011347 0.000000272 -0.000003724 -0.000071005 -0.000060495 0.000073282 -0.000001953 0.000003712 -0.000037151 0.000073812 -0.000012539 0.000006549 -0.000018065 -0.000005273 -0.000008925 -0.000007274 0.000000634 0.000000216 -0.000072558 0.000005024 -0.000027188 0.000001352 -0.000001678 0.000068726 0.000028260 0.000031496 -0.000000127 -0.000002682 -0.000010188 -0.000013905 0.000005622 -0.000001592 0.000003826 0.000111626 0.000075860 0.000036386 -0.000000800 -0.000002979 -0.000080307 -0.000090327 -0.000043097 0.000003286 -0.000005237 0.000139121 -0.000102115 -0.000105922 -0.000002584 0.000003448 0.000002335 -0.000078794 -0.000182064 0.000000345 -0.000002312 -0.000020710 0.000011925 -0.000331321 -0.000002370 0.000004344 -0.000060700 -0.000000953 -0.000058120 0.000001619 -0.000003350 0.000082985 0.000459895 0.000115150 -0.000001048 0.000003274 -0.000024265 0.000329734 -0.000037646 0.000001042 -0.000006059 0.000551891 -0.001414764 0.000137287 -0.000008800 -0.000007041 -0.001112821 -0.001106999 0.000221771 0.000007404 0.000016011 -0.000099109 0.000846383 0.000598390 0.000003700 0.000002175 0.000052711 0.000020415 0.000012687 -0.000000796 0.000000298 0.000011533 -0.000031250 -0.000018491 -0.000001253 0.000003352 0.000023179 -0.000015281 -0.000026847 -0.000002213 0.000006179 -0.000009012 0.000007754 -0.000001385 0.000000612 -0.000001204 -0.000091845 -0.000049719 -0.000018901 0.000001280 -0.000000640 -0.000068884 -0.000046057 -0.000018334 0.000001693 -0.000002965 0.000005087 -0.000009136 0.000001619 -0.000000603 0.000001109 0.000105015 0.000114074 0.000025952 -0.000001112 -0.000001194 0.000083611 0.000118629 0.000017177 -0.000000011 -0.000004149 -0.000008129 0.000008607 -0.000035507 -0.000000399 0.000000883 -0.000000535 0.000025763 -0.000093240 -0.000000272 0.000001120 -0.000093750 -0.000051190 -0.000086522 0.000002338 -0.000001934 0.000013853 -0.000017652 0.000034541 0.000000126 -0.000000899 -0.000010719 -0.000009118 -0.000030796 -0.000000411 0.000000299 -0.000066031 -0.000019716 -0.000053791 0.000001226 -0.000000969 0.000002256 0.000028177 -0.000030854 0.000000052 0.000000698 -0.000090617 -0.000033400 -0.000021192 0.000002306 -0.000002473 -0.000066300 -0.000015472 -0.000096154 0.000000799 -0.000000334 -0.000062890 -0.000027837 0.000013021 -0.000000720 0.000008313 -0.000165458 -0.000013927 -0.000012388 0.000000975 0.000018432 -0.000009375 0.000038701 0.000040664 0.000002640 -0.000014021 0.000121549 -0.000007552 0.000028265 -0.000002343 -0.000007086 0.000121701 -0.000051030 0.000093581 -0.000002282 -0.000014205 -0.000009068 0.000046151 0.000051987 -0.000004292 0.000011913 -0.000021878 0.000059651 -0.000016653 0.000000179 0.000006121 -0.000291561 0.000117372 -0.000012023 0.000007421 0.000009669 0.000114948 -0.000025265 0.000025153 -0.000000368 -0.000013950 0.000027775 -0.000026155 0.000045937 -0.000000490 -0.000008642 -0.000106574 -0.000066106 0.000090161 0.000002125 -0.000005221 -0.000123614 0.000067563 -0.000133716 0.000000786 0.000019412 0.000027895 0.000029603 -0.000017916 -0.000000650 0.000000419 0.000143375 -0.000017958 -0.000111547 -0.000002622 -0.000001061 0.000013979 -0.000038198 -0.000025726 0.000000556 -0.000001181 -0.000040787 0.000025370 0.000026985 0.000000601 -0.000000010 0.000076142 -0.000049986 0.000020500 -0.000000464 -0.000006785 0.000110162 0.000016848 -0.000090952 -0.000003318 0.000003598 -0.000107603 -0.000009425 0.000078328 0.000005428 0.000003884 -0.000031495 0.000029917 0.000005620 -0.000001499 0.000008003 -0.000006053 -0.000002984 0.000051327 -0.000002714 -0.000003624 -0.000255796 0.000083085 -0.000079929 0.000006228 0.000005132 0.000155420 0.000103765 0.000003686 -0.000005497 -0.000000296 -0.000187153 0.000040609 0.000119101 0.000005217 0.000010547 0.000326052 0.000110056 -0.000575907 -0.000007481 0.000018307 -0.000388710 0.000518548 -0.001092318 -0.000008522 0.000041603 -0.000663000 -0.000051140 0.000024883 0.000006274 -0.000005083 0.000018792 -0.000017467 -0.000016226 -0.000000056 -0.000000758 0.000021129 0.000004076 -0.000021791 -0.000000767 0.000000345 -0.000002631 -0.000020547 0.000006947 0.000000272 -0.000000349 0.000012378 -0.000016879 0.000005985 0.000000353 -0.000000529 0.000014906 -0.000001924 0.000009535 0.000000164 -0.000001489 0.000012266 -0.000004498 -0.000002692 0.000000387 -0.000003041 -0.000054063 -0.000011023 -0.000008106 -0.000102846 -0.000035193 -0.000035981 0.000002854 0.000000255 -0.000034348 0.000057112 0.000006933 -0.000008677 0.000015496 0.000009827 0.000024530 0.000038744 0.000006346 0.000007398 -0.000046429 -0.000010039 0.000044923 0.000013763 -0.000002502 0.000095405 0.000008664 0.000014979 0.000000290 0.000002374 0.000072931 0.000024677 -0.000007814 -0.000037087 0.000002866 -0.000046798 0.000083821 -0.000079967 -0.000013946 -0.000010340 -0.000045540 0.000021452 -0.000017260 0.000000020 0.000000716 -0.000040426 -0.000069705 -0.000013571 0.000022688 -0.000005265 -0.000070424 0.000045749 0.000009951 0.000011911 -0.000009394 -0.000077429 -0.000272046 -0.000002992 -0.000001156 0.000001367 -0.000005597 -0.000302078 -0.000006419 -0.000009049 0.000000835 0.000053914 -0.000100287 0.000014115 -0.000019608 -0.000002082 -0.000034450 0.000213178 0.000002297 -0.000011259 0.000005958 -0.000017383 0.000064177 0.000016586 0.000007136 0.000002454 -0.000007658 -0.000006392 0.000020849 -0.000014857 0.000009919 -0.000011040 0.000019511 -0.000010777 0.000011026 -0.000009313 -0.000003038 0.000005446 -0.000020655 0.000011357 -0.000012627 0.000005775 -0.000008906 0.000008268 0.000000534 0.000005825 0.000025512 0.000015932 -0.000033096 0.000009995 -0.000018371 0.000012718 0.000004473 0.000254599 0.000058266 0.000008061 -0.000464281 0.000691558 -0.000076483 0.000141440 -0.000090018 0.001291505 -0.000432913 -0.000187043 0.000050692 -0.000082172 0.001246356 -0.000907480 0.000008942 0.000002336 -0.000005870 0.000270533 -0.000118664 -0.000001069 0.000003053 -0.000000278 0.000059727 -0.000328129 0.000018197 -0.000008225 -0.000009447 -0.000020491 0.000424736 -0.000005701 0.000001641 0.000000647 -0.000020687 -0.000007792 -0.000002989 0.000004511 0.000005890 -0.000035864 -0.000020988 0.000026257 0.000006238 -0.000011733 0.000010873 -0.000016024 -0.000333578 0.000031927 0.000079230 0.000003480 -0.000002432 0.000236842 -0.000244258 0.000339734 0.000002512 -0.000014681 0.000392252 -0.000084842 0.000094845 -0.000001307 -0.000002583 0.000010296 -0.000152228 0.000643044 0.000004531 -0.000014420 0.000203590 -0.000308043 0.000582619 0.000005827 -0.000026722 0.000339914 -0.000013015 0.000148889 -0.000002464 -0.000000874 -0.000093383 -0.000008633 0.000003607 0.000113237 -0.000260268 0.000115089 -0.000089373 0.000066105 -0.001119561 0.000471726 0.000088687 -0.000032224 0.000041892 -0.000476256 0.000300054 -0.000174551 -0.000031163 -0.000011124 0.000449293 -0.000356837 0.000009037 -0.000045895 0.000025015 -0.000200878 -0.000100521 0.000142263 -0.000016316 0.000058096 -0.000625621 0.000500681 0.000018184 0.000014471 -0.000010159 -0.000001009 0.000000185 0.000005314 0.000002684 0.000005674 0.000001047 -0.000003948 -0.000003620 0.000001361 -0.000005546 -0.000001409 0.000004575 -0.000022843 -0.000023420 0.000031849 0.000001471 -0.000003862 0.000009406 0.000001734 0.000019423 0.000003366 -0.000011023 -0.000012212 0.000000966 -0.000012879 -0.000005012 0.000014153 -0.000026492 -0.000012548 0.000000645 -0.000001275 0.000004399 0.000004375 0.000000156 -0.000000783 0.000000476 0.000000938 -0.000012844 -0.000008424 0.000000275 0.000000531 -0.000000347 0.000008182 0.000007765 -0.000006391 -0.000001083 -0.000000549 0.000010649 0.000002734 0.000000396 0.000001114 -0.000002437 -0.000014992 -0.000006181 -0.000006031 -0.000000459 0.000004308 -0.000000703 0.000001686 -0.000004568 -0.000000569 0.000001807 -0.000004484 0.000000054 0.000001046 -0.000000680 -0.000000019 0.000003770 0.000004510 -0.000001754 -0.000000896 0.000001708 0.000006872 0.000004457 -0.000002556 -0.000000476 0.000001954 0.000000809 0.000002408 0.000000055 -0.000000898 0.000000626 -0.000003275 -0.000000834 0.000000151 -0.000000391 0.000000298 0.000016755 0.000014434 -0.000012278 -0.000000706 0.000000849 -0.000002283 -0.000000976 -0.000007109 0.000000229 0.000003966 0.000016094 0.000000619 0.000008084 0.000003766 -0.000008885 0.000012632 0.000003739 0.000007721 0.000000475 -0.000004489 0.000007522 0.000000492 0.000001995 0.000001347 -0.000001640 -0.000001393 -0.000001508 -0.000002839 0.000001238 0.000000323 -0.000002010 -0.000003216 0.000003354 0.000001510 -0.000002678 -0.000002179 0.000000120 0.000004163 -0.000001265 -0.000001973 -0.000005637 0.000002125 -0.000006324 -0.000002113 0.000004835 0.000003751 0.000001675 -0.000000264 0.000000112 -0.000000977 0.000002411 0.000003211 -0.000000144 -0.000001163 0.000000185 -0.000006213 -0.000002679 0.000001219 -0.000000165 -0.000000472 -0.000009785 -0.000002924 -0.000016377 -0.000004097 0.000014348 -0.000048570 -0.000016590 0.000015753 -0.000009555 0.000013276 -0.000006639 0.000000479 -0.000011288 -0.000001386 0.000004093 -0.000012334 -0.000003522 0.000004575 0.000000465 -0.000002168 0.000015687 0.000002806 -0.000011347 -0.000000998 0.000004411 -0.000009332 -0.000003335 -0.000001431 -0.000006857 0.000007788 0.000002589 0.000000196 0.000010212 0.000002571 -0.000009115 0.000022368 0.000006424 -0.000008961 0.000002488 -0.000001727 0.000006426 -0.000006138 0.000008953 0.000003301 -0.000008075 0.000000128 0.000001427 0.000000675 -0.000000720 0.000001389 -0.000003827 -0.000002357 -0.000006548 -0.000005506 0.000013170 0.000002371 -0.000003759 0.000001313 -0.000000292 0.000000782 -0.000001929 -0.000004533 -0.000001157 -0.000001103 0.000002912 -0.000013313 -0.000003016 0.000000127 -0.000001728 0.000003320 -0.000004806 0.000002553 -0.000002279 -0.000001691 0.000003432 0.000004210 0.000000059 -0.000002506 -0.000000411 0.000002159 0.000002526 0.000001341 -0.000004469 -0.000000834 0.000003071 0.000000345 0.000002958 -0.000001244 -0.000000459 0.000001272 0.000004920 0.000007076 -0.000010668 -0.000002953 0.000011226 -0.000001792 -0.000004130 0.000011184 0.000002847 -0.000008876 0.000006233 0.000001125 -0.000006818 -0.000002473 0.000009068 -0.000007164 0.000001375 -0.000005434 -0.000004363 0.000009335 0.000009741 0.000001321 -0.000010942 -0.000000762 0.000004593 -0.000001047 -0.000001924 -0.000003381 -0.000002560 0.000006575 -0.000004646 -0.000003690 0.000002573 0.000000287 -0.000001522 0.000003120 0.000000077 0.000001447 0.000001486 -0.000003718 -0.000007943 0.000000575 0.000000477 -0.000000371 -0.000000466 0.000000296 -0.000001778 0.000000342 -0.000000183 0.000000577 0.000006865 0.000003343 -0.000004115 -0.000000948 0.000003953 -0.000002969 0.000001253 0.000000077 -0.000000084 -0.000000044 -0.000337507 0.000498274 -0.000319658 -0.000004140 -0.000042447 0.000042356 -0.000121952 0.000088815 -0.000016978 -0.000036130 -0.000064138 0.000368535 -0.000183573 -0.000031384 -0.000018907 0.000078634 0.000110903 -0.000012716 0.000027509 -0.000007940 0.000140992 -0.000050075 0.000082416 -0.000014960 0.000039676 0.000051765 -0.000038767 -0.000019809 0.000026267 0.000006628 0.000052372 -0.000002829 0.000017113 0.000001425 -0.000001355 0.000036945 -0.000038109 0.000046217 0.000001845 -0.000001592 -0.000046143 0.000098882 0.000004760 -0.000002397 0.000003698 0.000133353 0.000151724 -0.000035133 -0.000003118 0.000006985 0.000037896 -0.000044930 -0.000010943 0.000021471 0.000006427 0.000027556 0.000070946 0.000002981 0.000013955 0.000009880 0.000120354 0.000039917 -0.000127337 -0.000016861 -0.000010761 0.000157415 0.000312768 0.000017574 0.000017916 -0.000012978 -0.000229454 -0.000227464 -0.000115722 -0.000025487 -0.000009082 0.000036916 -0.000155852 0.000144768 0.000003050 0.000010042 -0.000041807 0.000046155 -0.000022387 0.000026433 -0.000026847 0.000108458 0.000007499 0.000030610 0.000018547 -0.000000843 0.000174461 0.000219124 -0.000153785 -0.000008245 0.000008453 0.000177998 -0.000391546 0.000320397 -0.000008219 0.000017568 -0.000210077 0.000601701 -0.000147203 -0.000009504 0.000009620 0.000019436 -0.000173799 0.000026657 0.000021114 -0.000014559 0.000011266 0.000042299 -0.000022409 -0.000028400 0.000028017 0.000091945 -0.000065733 0.000062909 0.000046437 -0.000027642 0.330720933 0.058189925 0.686154967 -0.068811918 0.082792321 0.199214291 -0.314680214 -0.033572553 0.156138066 0.712548934 -0.000472399 -0.072788475 -0.012578149 -0.007589673 0.741406869 0.000345769 -0.014376393 -0.006500911 0.001727811 0.087908008 0.000805956 -0.012387069 -0.000822520 -0.000046469 0.025708936 0.006907071 -0.259184196 -0.071608956 -0.136045645 0.017210269 -0.003636427 -0.051505415 -0.088704359 -0.066890048 0.025628569 -0.012698515 -0.067034469 -0.055855213 -0.213122370 0.077771269 -0.001044696 -0.327488741 -0.015444869 0.106612827 0.057994965 -0.002849168 -0.035083584 -0.073070510 -0.006334303 -0.011579449 -0.005611205 0.037016180 -0.017089481 -0.149303811 -0.065978335 0.002354563 0.009464863 0.009589275 0.032732661 -0.263021250 -0.000985170 0.024956561 0.012499315 0.000301857 -0.050625943 0.001575099 0.086864796 0.008589844 -0.007062919 -0.057774228 -0.002817618 0.063890665 0.004574502 -0.015548493 -0.284752676 -0.002236666 -0.011720677 -0.004175546 -0.014753650 -0.025630586 0.000704829 -0.069846078 -0.022695304 -0.039852357 0.021659193 -0.000214767 -0.014020727 -0.000255319 0.009790475 0.001067432 0.001294203 -0.008160350 0.002653096 0.003598307 -0.001014743 0.000551760 -0.019368774 -0.000919962 0.011184740 -0.000102090 -0.000148678 -0.014830398 -0.008579526 -0.020356741 0.000624462 0.001261691 -0.000333450 0.002272530 -0.001221841 -0.000177150 0.000272525 0.009632529 0.003968068 0.010350595 0.002958300 -0.000003475 0.001574906 -0.000249446 0.001500593 -0.016744456 -0.000143260 0.000047527 0.005787255 -0.003196825 -0.007460761 -0.000369443 0.000571006 -0.003454963 -0.004717953 -0.018037833 0.000195215 0.004492206 0.001813949 0.003467132 -0.126570182 0.000147803 0.000746365 -0.000815901 -0.001207295 0.001412800 -0.000135768 -0.001760908 -0.001297849 -0.005366876 0.020988994 -0.000189660 -0.004186779 -0.001763501 -0.004188457 -0.004722234 0.000203529 0.003097372 0.001058774 0.002232098 0.014126494 0.000052889 0.000984762 0.000486673 0.001362682 0.038015377 -0.000014101 0.000107003 0.000024212 0.000006795 0.000849572 -0.000037300 -0.000350986 -0.000174174 -0.000265864 -0.000637175 0.000022695 0.000065325 0.000077224 0.000175547 -0.000502659 0.000002607 0.000140130 0.000024890 0.000021563 -0.004133275 -0.000031396 -0.000465265 -0.000087038 -0.000434862 -0.000757093 -0.000006459 -0.000236045 -0.000157365 -0.000369614 -0.001722109 -0.000001326 -0.000004145 0.000001264 0.000024838 0.000017306 0.000000606 0.000023545 0.000009386 0.000022732 0.000068701 -0.000005970 -0.000091818 -0.000023688 -0.000033669 -0.000062620 -0.000013880 -0.000284683 -0.000107118 -0.000228253 0.000060230 -0.000001442 0.000033062 0.000005946 0.000023766 0.000143478 -0.000004098 0.000030835 0.000029284 0.000117370 0.001431257 0.000002640 0.000300367 0.000103312 0.000207131 -0.000352262 0.000001757 0.000058504 0.000015218 0.000029613 -0.000187135 -0.000007196 -0.000061637 -0.000003879 -0.000040954 -0.000341928 0.000008818 0.000077898 0.000025377 0.000038040 0.000509155 0.000001014 0.000042829 0.000015016 0.000023196 -0.000015370 -0.000003132 -0.000031432 -0.000013390 -0.000014591 0.000043720 -0.000005215 -0.000127153 -0.000042437 -0.000090236 -0.000341682 0.000002062 0.000001701 0.000000535 0.000005269 -0.000137496 -0.000003091 -0.000041331 -0.000025148 -0.000082939 -0.000111874 -0.000002888 -0.000011325 -0.000004597 -0.000010730 0.000017010 -0.000002952 -0.000059414 -0.000019567 -0.000044509 -0.000025276 0.000004254 0.000020028 0.000008844 0.000018811 -0.000018317 0.000006874 0.000032582 0.000016323 0.000033610 0.000666296 0.000001692 -0.000034847 -0.000022827 -0.000009532 0.000238261 0.000008161 0.000015943 0.000012496 0.000033440 0.000139014 0.000001248 0.000028170 0.000008898 0.000019994 0.000008834 -0.000000970 -0.000009307 -0.000004620 -0.000005532 -0.000013292 -0.000001715 -0.000029326 -0.000009361 -0.000023620 0.000016351 0.000002429 0.000014635 0.000005708 0.000008849 0.000018568 -0.000000951 -0.000014696 -0.000007021 -0.000010670 0.000002746 -0.000002690 -0.000017961 -0.000007137 -0.000012981 0.000086795 0.000000846 0.000003010 0.000001470 0.000003865 0.000046351 -0.000000930 -0.000012387 -0.000005509 -0.000008718 0.000013125 -0.000002938 -0.000012918 -0.000005039 -0.000010198 -0.000031465 -0.000151244 -0.001448536 -0.000129598 0.004758678 -0.059708813 -0.000452234 0.002893933 0.007486753 -0.001858079 -0.011939894 -0.001142456 0.011422214 0.000196641 -0.000328481 -0.002530998 0.000396028 -0.002147232 0.000190043 -0.000577580 0.005143818 0.000352024 -0.001225554 -0.000241129 0.000429735 0.003935086 -0.000124258 0.000342874 0.000459669 -0.000159274 -0.006735146 0.000024286 0.000036684 0.000012925 -0.000015458 -0.000054846 -0.000053572 -0.000071313 0.000031977 -0.000099976 -0.000097049 -0.000019207 -0.000037737 -0.000018421 -0.000000480 -0.000110738 0.000030284 0.001056653 0.000254715 0.000685753 0.000917781 -0.000182593 -0.004254141 -0.001285652 -0.002274002 -0.003880271 -0.000063339 -0.002146434 -0.000610385 -0.001226814 -0.001443564 0.000041360 0.001165683 0.000313034 0.000801369 0.000500276 0.000133440 0.002609507 0.000826661 0.001647893 0.001874352 0.000223941 0.004267396 0.001333132 0.002734735 0.003459051 -0.000147451 -0.003042136 -0.000910072 -0.001908898 -0.001797819 -0.000108244 -0.001807491 -0.000529199 -0.001143958 -0.001263743 -0.000038687 -0.000617012 -0.000195944 -0.000362656 -0.000455421 0.000076696 0.002045211 0.000606342 0.001282081 0.000815175 0.000106162 0.000896423 0.000237830 0.000585422 0.001121489 -0.000021510 -0.000387532 -0.000062205 -0.000304868 -0.000385907 -0.000010313 -0.000327147 -0.000090409 -0.000223837 -0.000118766 -0.000026539 -0.000115879 -0.000025605 -0.000077377 -0.000189690 0.000016300 0.000134572 0.000008660 0.000098054 0.000155395 -0.000008428 -0.000499329 -0.000154066 -0.000288921 -0.000198831 -0.000025765 -0.000062190 -0.000004096 -0.000079887 -0.000303543 0.000012395 0.000093057 0.000002581 0.000096055 0.000288283 -0.000004716 -0.000275964 -0.000084259 -0.000169365 -0.000047213 -0.000021137 -0.000112398 -0.000027792 -0.000076381 -0.000216766 -0.000000290 0.000018413 -0.000007463 0.000024353 0.000023460 0.000075558 0.001361119 0.000438078 0.000812832 0.001207285 -0.000033655 -0.000562334 -0.000177580 -0.000338691 -0.000370668 -0.000109193 -0.001812020 -0.000552487 -0.001105447 -0.001517537 -0.000002410 -0.000013801 -0.000004353 -0.000016993 -0.000037093 0.000027801 0.000403719 0.000117365 0.000257816 0.000322528 0.000045253 0.000689343 0.000221142 0.000416395 0.000518018 -0.000000025 0.000134296 0.000030836 0.000109771 0.000058839 0.000008921 -0.000089614 -0.000022525 -0.000078939 -0.000027052 -0.000010289 -0.000054253 0.000000556 -0.000041420 -0.000073841 -0.000001555 -0.000004496 -0.000001411 -0.000002603 -0.000004411 -0.000004019 -0.000053098 -0.000013067 -0.000038597 -0.000029549 0.000001053 0.000048643 0.000019895 0.000031086 0.000029071 0.000002721 -0.000001197 -0.000002115 -0.000005953 0.000015003 0.000002064 0.000075977 0.000021928 0.000055387 0.000020321 -0.000003217 -0.000039562 -0.000010618 -0.000021359 -0.000008308 0.000004225 0.000060771 0.000016718 0.000041181 0.000059520 -0.000000803 0.000008186 0.000003396 0.000012217 0.000039366 -0.000000075 0.000035381 0.000006981 0.000033370 0.000048774 -0.000002739 -0.000044095 -0.000009503 -0.000026866 -0.000029546 0.000001318 0.000012230 0.000002866 0.000003964 -0.000033435 -0.000005041 -0.000071242 -0.000016086 -0.000059945 -0.000099226 -0.000003092 0.000217831 0.000070069 0.000113801 0.000079493 0.000017269 -0.000086387 -0.000047749 -0.000003807 0.000220481 0.000003477 -0.000133555 -0.000040417 -0.000107396 -0.000154792 0.000001520 0.000035707 0.000011167 0.000023172 0.000012795 0.000003595 0.000024702 0.000006059 0.000017348 0.000037197 0.000003859 0.000036024 0.000007018 0.000025929 0.000043112 -0.000002106 -0.000016083 -0.000004498 -0.000010235 -0.000018618 -0.000001812 -0.000059701 -0.000018104 -0.000038866 -0.000019120 -0.000002208 -0.000053672 -0.000014095 -0.000034615 -0.000026803 0.000002079 0.000012735 0.000003494 0.000007599 0.000019490 -0.000000018 0.000053766 0.000016922 0.000032422 -0.000003072 -0.000002022 0.000026159 0.000010352 0.000013041 -0.000023428 -0.000001161 -0.000017717 -0.000005951 -0.000009218 -0.000018775 -0.000001317 -0.000027930 -0.000008886 -0.000017669 -0.000038963 -0.000006291 -0.000103133 -0.000029936 -0.000066119 -0.000077413 0.000001924 0.000023175 0.000008390 0.000013314 0.000026722 0.000000375 -0.000014270 -0.000004187 -0.000008873 -0.000009034 -0.000004546 -0.000070428 -0.000021637 -0.000044323 -0.000058099 -0.000001833 -0.000013221 -0.000004720 -0.000005915 -0.000023095 -0.000006235 -0.000086937 -0.000026271 -0.000052283 -0.000057530 -0.000004460 -0.000083044 -0.000027970 -0.000051313 -0.000064381 0.000006614 -0.000015015 -0.000012172 -0.000014279 0.000047109 0.000014010 -0.000033295 -0.000021966 -0.000006977 0.000126833 -0.000007575 -0.000031207 0.000003753 -0.000017674 -0.000074147 -0.000010723 0.000028405 0.000015205 0.000024619 -0.000076355 -0.000009462 -0.000002540 0.000002720 -0.000032544 -0.000105876 0.000004998 -0.000047754 -0.000034618 -0.000056219 0.000040920 0.000001643 -0.000021273 -0.000021839 -0.000004743 0.000033390 0.000010569 -0.000083947 -0.000013910 -0.000022993 0.000092082 -0.000011864 0.000034711 0.000012494 0.000019625 -0.000092071 -0.000005293 -0.000010829 0.000002664 -0.000019359 -0.000048162 -0.000000198 -0.000052979 -0.000012906 -0.000038814 -0.000006710 0.000014757 0.000012771 -0.000004096 0.000031141 0.000130093 -0.000002003 0.000005159 0.000000055 0.000002931 -0.000017843 -0.000003214 0.000088368 0.000026091 0.000060542 -0.000020265 0.000000398 0.000020843 0.000007832 0.000021180 0.000009153 -0.000000921 -0.000030720 -0.000009180 -0.000018684 -0.000007809 -0.000002714 0.000022769 0.000012330 0.000010082 -0.000025466 -0.000001249 0.000064424 0.000014277 0.000038348 -0.000012009 0.000014155 -0.000077276 -0.000021813 -0.000068936 0.000085382 0.000001427 -0.000020226 -0.000020511 -0.000014155 0.000028539 0.000001220 -0.000035287 -0.000008196 -0.000063748 -0.000028901 0.000013439 -0.000031937 0.000013244 0.000001468 0.000107742 -0.000008509 0.000017558 -0.000009649 -0.000011130 -0.000063800 0.000013928 -0.000107350 -0.000023915 -0.000067078 0.000112575 0.000016651 0.000259182 0.000069448 0.000195673 0.000152663 0.000019996 0.000037030 -0.000019266 0.000058259 0.000238653 0.000007083 -0.000267353 -0.000074162 -0.000192038 0.000094567 0.000001737 0.000017983 0.000006945 0.000011314 0.000012918 -0.000000550 0.000008972 0.000001696 0.000005511 -0.000004109 0.000001129 0.000003363 0.000001857 0.000001938 0.000009739 0.000001214 0.000010098 0.000004046 0.000006054 0.000008814 -0.000001800 0.000002391 0.000001613 0.000003002 -0.000013811 -0.000001004 0.000004009 0.000003902 0.000002712 -0.000008683 -0.000046204 -0.000034307 -0.000020978 0.000009357 0.000104581 0.000010740 -0.000012163 -0.000065098 -0.000008353 0.000019940 0.000018340 0.000042918 -0.000013114 0.000004351 0.000021787 0.000003068 0.000011052 0.000022199 0.000111931 0.000072221 0.000051396 0.000047447 0.000068164 -0.000108911 -0.000106144 0.000046100 -0.000004849 -0.000002294 -0.000100335 -0.000104150 0.000036817 0.000075458 0.000236029 -0.000222241 0.000109094 -0.000088391 -0.000082501 0.000124641 -0.000347794 -0.000147954 -0.000052224 -0.000048259 0.000045183 -0.000099766 0.000038502 0.000000239 0.000073388 -0.000095493 -0.000056108 -0.000154164 0.000014913 -0.000006956 -0.000456497 0.000560494 -0.000058511 -0.000223715 -0.000086837 0.000826832 -0.000011181 0.000127805 -0.000021597 -0.000099002 0.000129886 -0.000008108 -0.000001933 0.000066138 0.000076764 -0.000036837 -0.000037275 0.000156229 0.000027386 0.000052581 -0.000007755 -0.000147699 0.000081648 -0.000004328 0.000006255 0.000001946 0.000014098 -0.000000516 0.000009902 0.000029541 -0.000001130 0.000019447 0.000054703 -0.000003843 -0.000008531 -0.000009759 0.000000954 -0.000004789 -0.000005053 -0.000023834 -0.000010322 -0.000004172 -0.000029675 0.000006963 0.000027097 -0.000003872 -0.000020504 -0.000025101 -0.000002535 -0.000029819 -0.000004476 -0.000029388 -0.000044132 0.000382023 0.001802074 0.000073514 -0.000536531 0.000556134 -0.000216356 -0.001182797 -0.000850463 0.000876444 -0.001816914 -0.000308008 -0.002306537 0.000595943 0.000408456 -0.001523253 -0.000007880 -0.000087102 0.000133397 -0.000032296 -0.000075808 0.000083770 -0.000140056 -0.000037183 0.000613220 -0.000063770 0.000226964 0.000101830 -0.000199549 -0.000213669 0.000071610 -0.000011028 -0.000017318 0.000006815 0.000005763 -0.000001894 -0.000011203 -0.000022170 0.000013412 -0.000000939 -0.000028471 -0.000009367 0.000029824 0.000039633 0.000062905 0.000004178 -0.000005861 -0.000165749 -0.000050628 -0.000117138 -0.000032285 -0.000006001 0.000039266 0.000023833 0.000018585 -0.000070848 -0.000007285 0.000147041 0.000045875 0.000109546 -0.000076765 -0.000017651 -0.000144931 -0.000040659 -0.000114249 -0.000169444 -0.000011237 -0.000023081 0.000015440 -0.000032528 -0.000132217 -0.000008958 0.000078582 0.000019527 0.000052837 -0.000096264 -0.000347411 -0.001174623 0.000286080 -0.000157272 -0.000462264 0.000291290 0.001794990 -0.000114263 -0.000070285 0.001710365 -0.000076852 0.000083189 -0.000049215 -0.000608335 0.000330190 -0.000215376 -0.001068363 0.000003388 0.000614337 -0.000186101 -0.000003989 -0.000188633 0.000146090 -0.000124825 0.000162643 0.000227717 0.001523014 -0.000067888 -0.000472678 0.000734475 -0.000003234 0.000009116 0.000000987 0.000013167 -0.000015665 -0.000001232 -0.000001024 0.000003012 -0.000001128 -0.000010097 0.000000542 0.000002171 -0.000002909 0.000002615 0.000006138 0.000004681 -0.000019673 -0.000001283 -0.000033565 0.000013883 -0.000002504 -0.000008869 0.000004744 -0.000012285 -0.000021925 0.000002802 0.000003222 -0.000009928 0.000005169 0.000019614 0.000004235 -0.000006895 -0.000004872 -0.000011855 0.000026343 0.000000206 0.000002939 0.000000277 0.000003047 0.000001169 0.000002417 -0.000002236 0.000000428 -0.000005283 0.000014404 -0.000002450 0.000003476 0.000000626 0.000008560 -0.000009774 -0.000001092 0.000003736 0.000003088 0.000004654 -0.000007659 0.000003182 0.000000414 -0.000002744 -0.000002750 0.000020856 0.000000094 0.000001928 -0.000001141 0.000002624 0.000003036 -0.000000171 -0.000003264 -0.000001268 -0.000003149 -0.000000573 -0.000000961 0.000001003 -0.000001586 0.000002447 -0.000004674 -0.000000825 0.000003083 -0.000000774 0.000005173 -0.000004170 -0.000000812 -0.000001191 -0.000001191 0.000000163 -0.000004058 0.000000140 -0.000001604 -0.000000668 -0.000001261 0.000001237 -0.000003222 0.000009105 0.000001128 0.000016223 -0.000014105 0.000001534 0.000005140 -0.000001224 0.000004242 0.000011801 -0.000001907 0.000001889 0.000007923 0.000001265 -0.000016721 -0.000002260 -0.000000700 0.000002928 -0.000000611 -0.000017188 -0.000000210 0.000003224 0.000002182 0.000001319 -0.000003537 0.000000763 0.000001632 0.000000749 0.000002426 0.000005438 0.000000472 -0.000001598 0.000001781 -0.000004195 0.000000993 -0.000000999 -0.000005021 -0.000000226 -0.000004039 -0.000006190 0.000000538 0.000000353 -0.000003773 0.000002471 0.000006219 -0.000000752 0.000000844 0.000000987 0.000002420 -0.000004184 -0.000001340 -0.000001131 -0.000000727 0.000001911 -0.000006698 0.000000735 -0.000002527 -0.000000310 -0.000004168 0.000003816 0.000003728 0.000011669 -0.000006463 0.000012416 0.000031177 0.000006141 -0.000026085 -0.000018138 -0.000030825 0.000032836 0.000000464 0.000003916 -0.000004058 0.000004918 0.000009166 0.000000229 -0.000009248 -0.000002555 -0.000012534 -0.000001919 -0.000000247 0.000017618 0.000003108 0.000019979 0.000007596 0.000001672 -0.000001224 -0.000004422 0.000001579 0.000022039 -0.000001993 -0.000008068 0.000004990 -0.000008328 -0.000017121 -0.000001736 0.000015397 0.000007011 0.000017782 -0.000007580 -0.000000609 -0.000000230 0.000006599 -0.000003696 -0.000007563 0.000000155 -0.000000688 -0.000000839 0.000000364 -0.000000196 0.000003381 0.000008659 -0.000007525 0.000007655 0.000023320 0.000000831 0.000003626 0.000000882 0.000002488 0.000006341 0.000001294 0.000003121 -0.000001212 0.000001641 0.000010007 0.000001365 -0.000005673 -0.000004343 -0.000006156 0.000009131 0.000000492 -0.000001755 -0.000003273 -0.000001154 0.000002376 0.000000560 0.000005253 -0.000000084 0.000004437 0.000004271 0.000000473 0.000004601 -0.000000994 0.000004838 0.000004428 -0.000000149 -0.000000546 -0.000001063 0.000000443 -0.000002270 0.000001565 0.000009212 -0.000005355 0.000012306 0.000009199 -0.000000780 -0.000008460 0.000004641 -0.000010960 -0.000011916 0.000002100 0.000011775 -0.000003049 0.000011395 0.000015361 0.000001779 0.000000841 -0.000006817 0.000001930 0.000012695 0.000000529 0.000014501 0.000000600 0.000015058 0.000008937 0.000001916 0.000005984 -0.000003530 0.000003658 0.000013979 0.000000307 -0.000002452 0.000000172 -0.000004555 0.000002648 -0.000001007 -0.000000358 0.000002866 0.000000428 -0.000005456 -0.000000286 -0.000007135 -0.000001710 -0.000005595 -0.000003224 0.000000492 0.000001761 0.000000103 0.000000836 0.000003797 0.000000487 0.000006782 -0.000000841 0.000007178 0.000002583 -0.000000246 -0.000003192 -0.000000868 -0.000001969 -0.000002773 0.000003933 -0.000333820 -0.000072943 -0.000111686 -0.000338416 0.000020782 -0.000322826 -0.000071478 -0.000115931 -0.000236662 0.000024507 -0.000074653 0.000008691 0.000082604 -0.000221721 -0.000011675 0.000042598 0.000041878 0.000020272 0.000030579 -0.000000731 0.000232267 0.000056070 0.000118375 0.000154205 -0.000015494 0.000187385 0.000042143 -0.000032630 0.000140458 0.000000945 0.000003272 -0.000004272 0.000002594 0.000047326 0.000000940 -0.000004772 0.000016214 0.000024602 -0.000006212 -0.000001167 -0.000039285 -0.000005180 -0.000005171 -0.000011447 0.000008320 0.000122256 0.000046418 0.000111656 0.000127175 -0.000014629 0.000096642 0.000023634 0.000000564 0.000091517 -0.000008292 0.000113633 0.000027715 0.000007841 0.000121429 -0.000000255 -0.000377337 -0.000097733 -0.000199830 -0.000284474 0.000004517 0.000425146 0.000176167 -0.000065067 0.001028905 0.000014522 -0.000716652 -0.000217032 -0.000039118 -0.001078770 0.000007305 0.000205547 0.000030069 0.000032457 0.000102506 -0.000023663 0.000178452 0.000098007 -0.000056524 0.000141558 -0.000010503 0.000395441 0.000159437 0.000109688 0.000208862 0.000001515 0.000244441 0.000008532 0.000181736 -0.000029545 0.000018750 -0.000145840 -0.000038677 0.000069016 0.000368359 0.000005062 -0.000193894 -0.000056507 -0.000078454 -0.000259260 -0.000018957 0.000060022 0.000002933 0.000024789 -0.000166678 0.000031774 0.000544295 0.000191874 -0.000017008 0.001464581 -0.000021587 0.000525616 0.000277755 0.000012533 0.000286462 0.225839949 0.177020249 0.659199272 0.011590815 0.029906100 0.756901156 0.010665429 0.000841811 0.096227377 0.186198958 0.007078952 -0.006496031 -0.027255308 0.143348865 0.663027707 0.002790747 -0.011759153 -0.049678261 -0.023622154 -0.050108649 -0.001195384 -0.016112103 -0.008677986 0.009128779 0.007328167 -0.025189964 -0.040429913 0.001551767 0.015071208 0.060609180 -0.070728434 -0.127355459 -0.008397930 -0.005044431 -0.015249973 -0.090104925 -0.062159236 -0.006699725 -0.010584344 -0.017815751 -0.053274825 -0.195485851 -0.020347716 -0.018628552 -0.059279483 0.005169972 0.099786569 -0.152693495 -0.009080230 0.022871326 -0.078906390 -0.001527812 0.013039683 -0.082096608 -0.061647804 -0.015424908 -0.134224386 0.093828777 -0.050856358 -0.308157592 -0.000925834 0.001097733 -0.314607644 -0.021805473 0.090108726 0.005094864 -0.002633449 -0.023339012 -0.039158714 0.002920796 -0.002710378 -0.004160252 0.088170351 0.001315627 -0.089544666 -0.000092302 0.002076362 -0.003917142 -0.000745401 0.003337899 0.005825460 -0.002864444 -0.001020183 0.006136692 -0.000981920 -0.002350212 -0.003167023 0.002630423 -0.001220088 0.000443371 0.000563969 0.010719636 0.000485233 0.000096354 -0.000575215 0.003959681 0.004062082 -0.000263258 -0.000954442 -0.000695752 -0.000025657 0.010854889 -0.000732300 -0.000158631 -0.000635631 -0.008315177 0.000780232 -0.006974908 -0.003341047 -0.005096097 -0.070533086 -0.072702616 -0.001026496 0.004730817 0.000104735 -0.067432217 -0.251467482 0.001996178 0.000459881 0.008232663 0.012144972 0.031925434 0.000786712 0.001469859 0.005696805 -0.005286618 -0.013819166 -0.000135982 -0.000216417 -0.003483154 -0.008720860 -0.027499273 0.001311606 -0.000390728 -0.001957397 0.000356522 -0.003886268 0.000057054 -0.000151233 -0.000094821 -0.001870379 0.002411768 0.000012362 0.000284810 0.000328751 0.001078326 -0.000553645 -0.000120403 -0.000129015 -0.000114798 -0.002687155 -0.002451878 -0.000497052 -0.000109656 -0.000269362 0.006023263 0.001640088 0.000318948 -0.000239653 0.000795638 0.002526116 0.005675844 0.000041029 0.000184687 0.000517365 -0.000154161 -0.000081143 -0.000002333 -0.000007377 -0.000012349 0.000010077 -0.000095820 0.000005062 -0.000007372 -0.000026140 0.000046463 -0.000317124 0.000010346 -0.000006322 0.000065078 0.000475157 0.001030963 0.000069710 0.000099683 0.000329865 0.000469649 -0.000082088 0.000036302 -0.000026842 -0.000010678 -0.000265983 -0.000550208 0.000131437 0.000002218 -0.000115640 -0.000308828 -0.000305288 -0.000072017 -0.000090924 -0.000387919 -0.000419577 0.000053831 -0.000022011 0.000029779 -0.000090414 -0.000084667 -0.000672265 0.000061108 -0.000019475 0.000046434 -0.000123330 -0.000206650 0.000026125 -0.000003440 -0.000054646 0.000010821 -0.000125333 -0.000017274 0.000015848 -0.000052876 -0.000038607 0.000125286 0.000010079 -0.000009183 0.000026700 0.000246050 -0.000083123 -0.000016645 -0.000000918 0.000152418 -0.000384898 -0.000162002 -0.000037501 0.000022859 -0.000020993 0.000392807 0.000541146 0.000019317 0.000024021 0.000085641 -0.000053721 -0.000045796 0.000013576 0.000004481 0.000018516 0.000184419 0.000154293 0.000012866 0.000005675 0.000072922 -0.000026320 -0.000035409 -0.000016548 -0.000003874 -0.000020106 -0.000114831 -0.000482626 -0.000041091 -0.000031475 -0.000068466 -0.000072395 0.000012711 0.000017861 0.000000194 0.000053450 -0.000042572 -0.000178336 0.000032504 -0.000003414 0.000002986 -0.000018983 -0.000047919 -0.000011787 -0.000010027 -0.000042080 -0.000000983 0.000012721 0.000001711 -0.000002054 0.000008705 0.000032551 0.000043679 0.000020031 0.000010474 0.000043427 -0.000013301 -0.000027921 -0.000001505 -0.000000575 -0.000008830 -0.000044150 0.000054585 0.000000662 0.000006460 0.000014773 0.000042803 0.000065132 0.000017383 0.000006261 0.000014161 -0.000011845 -0.000045926 0.000000469 0.000001272 -0.000002726 0.000007836 0.000043555 0.000005621 -0.000005131 0.000016152 0.000018253 0.000052404 0.000004864 0.000003022 0.000009648 -0.021016825 -0.033708678 0.008976466 -0.002488803 -0.011263971 0.004743824 -0.009317643 -0.013075983 0.003665773 -0.016806339 -0.003390767 0.007023072 -0.040306800 -0.018669083 -0.040409450 -0.000747938 -0.000088993 0.004035357 0.002105560 0.005936948 0.001797655 0.001535861 0.001725425 0.000214233 0.003529487 -0.002807528 -0.005355334 -0.002716930 -0.000405673 -0.002014324 -0.000026723 -0.000006566 -0.000008709 -0.000002272 -0.000090808 0.000053400 0.000100080 0.000034814 0.000129185 -0.000083299 0.000025855 0.000072885 -0.000003022 0.000019858 -0.000087034 -0.000085159 -0.001214760 -0.000020121 -0.000302454 -0.001128254 0.001958265 0.007816168 0.000402886 0.001187196 0.004260461 0.001024945 0.004597098 0.000284166 0.000702456 0.002340360 -0.000550920 -0.001276374 -0.000191920 -0.000369241 -0.001378806 -0.001539917 -0.006066435 -0.000452921 -0.000845477 -0.002926507 -0.002809043 -0.008259701 -0.000520038 -0.001161188 -0.004602992 0.001312798 0.004578549 0.000550779 0.000916557 0.003434314 0.001095675 0.003129002 0.000338092 0.000543477 0.001991838 0.000498903 0.001253327 0.000130141 0.000170076 0.000727201 -0.001037327 -0.002951666 -0.000556058 -0.000653058 -0.002611026 -0.000711503 -0.002057510 -0.000096591 -0.000249107 -0.000761753 0.000160017 0.000677631 0.000013419 0.000194317 0.000252556 0.000179227 0.000438613 0.000091308 0.000117586 0.000440170 0.000141405 0.000301990 0.000008223 0.000023973 0.000076181 -0.000094351 -0.000239465 -0.000019064 -0.000067727 -0.000079681 0.000319038 0.000849079 0.000250656 0.000141165 0.000762432 0.000058898 0.000304647 -0.000093486 -0.000009399 -0.000086279 0.000030089 -0.000343972 0.000024368 -0.000032811 -0.000030541 0.000130893 0.000354970 0.000096850 0.000094110 0.000386063 0.000104650 0.000304820 -0.000017711 0.000023582 0.000038864 -0.000004861 -0.000036193 -0.000002042 -0.000027730 0.000001132 -0.000507503 -0.002425054 -0.000094871 -0.000348809 -0.001373605 0.000352140 0.001074715 0.000088124 0.000157873 0.000607457 0.000838674 0.003020187 0.000205190 0.000470851 0.001938458 0.000053397 0.000176379 0.000006497 0.000008755 0.000011356 -0.000238110 -0.000683198 -0.000062398 -0.000108081 -0.000431877 -0.000310805 -0.001090255 -0.000085501 -0.000171107 -0.000723836 -0.000077535 -0.000161350 -0.000029766 -0.000063146 -0.000184077 0.000020232 0.000101348 0.000021092 0.000060111 0.000109774 0.000059691 0.000110290 0.000014218 0.000030870 0.000032730 -0.000002869 0.000002426 0.000001652 -0.000000859 0.000003207 0.000040617 0.000082210 0.000009796 0.000020019 0.000071655 -0.000029945 -0.000096295 -0.000009803 -0.000010867 -0.000057752 -0.000004896 -0.000015176 0.000001107 0.000003825 0.000015197 -0.000032053 -0.000089540 -0.000022642 -0.000026172 -0.000109408 0.000022630 0.000056675 0.000016084 0.000011088 0.000049161 -0.000027128 -0.000116241 -0.000021595 -0.000017368 -0.000071994 0.000029795 -0.000011922 -0.000003197 0.000005877 -0.000024145 0.000006459 -0.000058161 -0.000013215 -0.000014652 -0.000047723 0.000022335 0.000071094 0.000008386 0.000012567 0.000036880 0.000036110 0.000036323 0.000010074 -0.000007134 0.000007740 0.000087405 0.000196645 0.000003392 0.000031405 0.000082349 -0.000201091 -0.000529649 -0.000180766 -0.000051915 -0.000419649 0.000097101 0.000038107 0.000164331 0.000050044 0.000262223 0.000000127 0.000285590 0.000058736 0.000041326 0.000178328 -0.000023130 -0.000053899 -0.000010128 -0.000011427 -0.000046391 -0.000019723 -0.000056747 -0.000000252 -0.000007073 -0.000012939 -0.000024820 -0.000072827 -0.000003740 -0.000013547 -0.000024370 0.000014298 0.000032667 0.000000845 0.000004353 0.000012419 0.000035770 0.000087261 0.000016833 0.000020930 0.000080481 0.000029171 0.000081256 0.000012792 0.000019715 0.000064030 -0.000011525 -0.000029660 0.000000038 -0.000002479 -0.000006676 -0.000021126 -0.000058671 -0.000022292 -0.000018384 -0.000082216 -0.000001720 -0.000009312 -0.000017644 -0.000007867 -0.000053730 -0.000002780 -0.000008038 -0.000002194 0.000001488 0.000016447 0.000001082 0.000101822 0.000000930 0.000008991 0.000034337 0.000055223 0.000211517 0.000019738 0.000031902 0.000118737 -0.000010383 -0.000052052 -0.000000997 -0.000004500 -0.000023446 0.000001764 0.000023042 0.000001596 0.000005394 0.000020481 0.000042700 0.000129342 0.000009079 0.000018383 0.000076044 -0.000000081 0.000017369 -0.000002605 0.000000195 0.000007762 0.000041947 0.000120665 0.000014407 0.000022670 0.000088759 0.000036911 0.000160877 0.000008777 0.000022659 0.000089569 0.000029769 -0.000003355 0.000013420 0.000032785 0.000070763 0.000044420 0.000007139 0.000083144 0.000017760 0.000156119 0.000023995 0.000069164 0.000004615 0.000027558 -0.000009149 -0.000041076 -0.000002190 -0.000022640 -0.000037711 -0.000096370 0.000000295 0.000054551 -0.000088974 0.000051542 -0.000045287 0.000050446 0.000103945 -0.000006835 0.000010659 0.000152353 0.000045865 0.000033998 0.000025954 0.000008467 0.000045216 0.000101348 0.000076794 0.000136544 0.000028983 0.000187566 -0.000052220 -0.000018229 -0.000056763 -0.000020051 -0.000135818 -0.000014629 0.000030192 -0.000033294 0.000002194 -0.000006822 0.000041390 0.000088279 0.000021763 0.000033031 0.000096017 0.000000619 -0.000075543 0.000074697 -0.000011246 0.000068396 0.000001824 0.000001693 -0.000011709 -0.000000936 -0.000021046 -0.000085960 -0.000134716 -0.000052719 -0.000043467 -0.000179712 -0.000022028 -0.000042697 0.000004798 -0.000007651 -0.000039559 0.000027267 0.000056032 0.000015818 0.000009431 0.000050379 -0.000030269 -0.000030890 -0.000025387 -0.000004518 -0.000061353 -0.000058167 -0.000091401 -0.000048004 -0.000029576 -0.000118927 0.000085518 0.000117843 0.000041114 0.000088354 0.000190842 0.000030520 0.000040221 0.000024321 -0.000031646 0.000065896 0.000018960 0.000063426 -0.000054527 0.000033251 0.000078481 0.000045570 -0.000030692 0.000106042 0.000039400 0.000112099 -0.000013007 0.000002824 -0.000065321 -0.000030973 -0.000069735 0.000153538 0.000137770 0.000111707 0.000072235 0.000274336 -0.000227839 -0.000445073 -0.000055655 -0.000108393 -0.000363963 -0.000012737 -0.000252227 0.000082440 -0.000055414 0.000027906 0.000226200 0.000282758 0.000135398 0.000131137 0.000495211 -0.000018221 -0.000034723 -0.000004377 -0.000002971 -0.000023234 -0.000010055 -0.000012562 -0.000008206 -0.000005311 -0.000018245 -0.000004480 -0.000011546 0.000001752 0.000001179 0.000000118 -0.000009629 -0.000019162 -0.000001322 -0.000001412 -0.000011990 -0.000002956 0.000001471 -0.000003981 -0.000002406 -0.000015808 -0.000006127 -0.000005573 -0.000003420 0.000000154 -0.000016780 0.000020868 -0.000035892 -0.000019873 0.000002476 0.000045623 0.000019535 0.000012411 -0.000042332 -0.000019208 0.000060560 -0.000002815 0.000006608 -0.000013123 -0.000035720 0.000030339 -0.000047947 -0.000103451 -0.000047528 -0.000064193 -0.000016735 0.000002095 0.000066315 0.000061766 0.000055374 -0.000058413 -0.000015685 0.000076608 0.000062145 -0.000018134 0.000009973 -0.000104981 -0.000209072 0.000031627 0.000037597 0.000327341 -0.000026982 -0.000006087 0.000067852 0.000038225 0.000294632 0.000004209 0.000000125 0.000039906 0.000205984 0.000012286 0.000037610 0.000184418 -0.000007056 -0.000006616 -0.000107781 0.000057983 -0.000063513 0.000060633 -0.000195088 0.000124877 -0.000016528 0.000031767 0.000125419 0.000039150 -0.000151479 0.000020432 0.000044573 0.000149014 0.000118611 -0.000062131 -0.000088241 -0.000156698 -0.000059447 -0.000022938 0.000026320 -0.000014154 -0.000038027 -0.000026768 0.000042614 0.000025044 -0.000003004 -0.000010460 -0.000006336 -0.000001642 -0.000026047 -0.000022643 -0.000068034 -0.000012095 -0.000013964 -0.000006772 0.000005442 0.000015160 -0.000000932 -0.000002302 0.000007661 0.000012987 0.000033717 0.000007164 0.000004946 0.000019628 0.000013817 0.000036892 -0.000010757 -0.000009162 -0.000018702 0.000019327 0.000059044 0.000006032 0.000005865 0.000030376 0.000383495 0.000578243 -0.001008734 -0.000983744 -0.001085132 -0.000026596 0.000463427 0.000416783 0.000170044 -0.000045479 -0.000512214 -0.000583686 0.001066246 0.000565831 0.000856264 0.000005972 0.000033914 0.000124431 0.000061260 -0.000003942 -0.000002477 0.000031460 0.000064959 -0.000054214 -0.000114073 -0.000047013 -0.000126360 -0.000133429 -0.000086623 0.000030181 0.000002892 0.000002121 -0.000022621 0.000007792 -0.000003200 0.000002975 0.000014855 -0.000051745 0.000005323 -0.000022780 -0.000004606 -0.000015842 0.000044188 -0.000044526 -0.000039937 0.000148922 0.000231953 0.000057438 0.000061569 0.000251585 -0.000044403 0.000013723 -0.000046406 -0.000000283 -0.000093384 -0.000126693 -0.000131419 -0.000077451 -0.000068206 -0.000291024 0.000135264 0.000327854 0.000007953 0.000052399 0.000165619 0.000006644 0.000155375 -0.000045762 0.000039480 -0.000010304 -0.000062283 -0.000030165 -0.000060245 -0.000046368 -0.000180441 -0.000114561 -0.000050962 0.000461772 0.000279195 0.000324306 0.000214264 -0.000172242 -0.000730128 -0.000346432 -0.000314282 0.000065169 0.000062942 -0.000310182 -0.000091145 -0.000096978 -0.000103877 -0.000244337 0.000474725 0.000355751 0.000275872 -0.000240013 -0.000466757 0.000188660 0.000242089 0.000394367 0.000267944 0.000538991 -0.000682690 -0.000482455 -0.000662129 -0.000002809 -0.000003081 -0.000002029 -0.000014239 -0.000029552 0.000001683 0.000007967 -0.000000300 0.000002047 -0.000007144 0.000000399 -0.000005259 0.000000284 -0.000005133 0.000003664 0.000005183 0.000016861 -0.000005738 0.000031033 0.000052927 0.000004976 0.000021101 -0.000004482 0.000013067 -0.000003306 -0.000001050 -0.000014028 -0.000002285 -0.000011550 0.000017075 0.000002660 -0.000004928 0.000000563 0.000009279 0.000038343 -0.000002127 -0.000004705 0.000000701 -0.000001703 -0.000004908 0.000000138 -0.000004077 0.000002732 0.000007456 0.000015424 -0.000000662 -0.000001114 -0.000000882 -0.000008596 -0.000016081 -0.000002316 -0.000000768 0.000000201 -0.000001853 -0.000015213 -0.000000299 -0.000009733 0.000003202 0.000002259 0.000018300 -0.000000732 -0.000004372 0.000000534 -0.000003349 -0.000000437 0.000002163 0.000004082 -0.000001010 0.000001079 0.000006491 0.000000313 0.000001281 -0.000001637 -0.000004714 -0.000004260 -0.000001325 -0.000001741 -0.000001023 -0.000005540 -0.000008707 0.000001099 0.000003158 -0.000001645 -0.000001980 -0.000000408 0.000000967 0.000001174 -0.000000196 0.000000752 0.000004121 -0.000002106 -0.000003235 0.000000025 -0.000014981 -0.000030217 -0.000002728 -0.000011466 0.000003418 -0.000003792 0.000001056 -0.000002103 0.000006430 0.000002672 0.000004539 -0.000022532 -0.000000070 0.000009295 -0.000004078 0.000000914 -0.000013395 -0.000002024 -0.000001023 0.000000470 -0.000000002 -0.000008988 -0.000001144 -0.000005065 0.000003827 0.000000346 -0.000000997 0.000000525 0.000002036 0.000002074 0.000005104 0.000002734 0.000002710 0.000008176 -0.000003411 0.000002698 0.000004114 0.000000729 -0.000003370 -0.000000987 -0.000004743 0.000006618 -0.000000331 0.000000529 -0.000000110 -0.000001495 -0.000006039 0.000001179 0.000003891 -0.000002000 -0.000002991 -0.000003579 0.000001271 0.000001691 0.000000063 0.000003493 0.000008387 -0.000005321 -0.000027753 0.000001547 -0.000016128 0.000012163 0.000011656 0.000011744 -0.000012335 0.000017177 0.000084009 -0.000000693 -0.000011084 0.000000478 -0.000005112 0.000003711 0.000005764 0.000012235 0.000000444 0.000010271 0.000017700 -0.000008431 -0.000024930 0.000001877 -0.000015670 -0.000026511 -0.000001627 -0.000013027 -0.000004978 -0.000003593 0.000019090 0.000004201 0.000018614 0.000001230 0.000009819 -0.000003865 -0.000007687 -0.000012893 0.000004619 -0.000011762 -0.000037302 -0.000001272 0.000003584 0.000003070 0.000007642 -0.000009820 0.000000031 0.000000680 -0.000001492 -0.000001011 0.000000987 -0.000005121 -0.000022258 -0.000006080 -0.000010682 0.000010002 -0.000003221 -0.000009295 0.000000032 -0.000001012 -0.000002050 -0.000002587 -0.000010089 -0.000000524 -0.000001604 0.000003786 0.000002861 0.000001417 -0.000001392 0.000002820 0.000020413 0.000001548 0.000002100 -0.000002352 -0.000001606 0.000007736 -0.000003233 -0.000008368 -0.000000458 -0.000003633 -0.000005107 -0.000002609 -0.000007471 -0.000000604 -0.000004656 -0.000003531 0.000000763 0.000003025 -0.000001040 -0.000001313 -0.000000198 -0.000004415 -0.000013918 -0.000004254 -0.000014113 -0.000004826 0.000003712 0.000016232 0.000002152 0.000012148 0.000001712 -0.000007230 -0.000022169 -0.000002921 -0.000011142 -0.000005306 -0.000000116 -0.000006782 -0.000004517 -0.000005652 0.000013301 -0.000007442 -0.000021668 0.000000821 -0.000012283 -0.000016946 -0.000003636 -0.000014441 -0.000002669 -0.000005113 0.000004670 0.000001032 0.000000863 0.000000833 0.000003919 0.000006702 0.000000217 0.000002581 0.000001835 0.000001597 -0.000006179 0.000004429 0.000010671 -0.000000155 0.000003482 0.000010143 -0.000001380 -0.000004726 -0.000000149 -0.000000418 0.000000252 -0.000003477 -0.000008137 -0.000001616 -0.000006754 -0.000008629 0.000002221 0.000005842 -0.000000258 0.000000973 0.000003529 -0.000141801 0.000590327 0.000013436 0.000106601 0.000272480 0.000468261 0.001108090 -0.000013342 0.000097983 0.000301130 0.000052665 0.000309415 -0.000053971 -0.000002074 0.000048742 -0.000154726 -0.000359991 0.000066540 -0.000002791 -0.000017984 -0.000109976 -0.000475449 -0.000025512 -0.000079880 -0.000214862 -0.000075570 -0.000296491 -0.000005317 -0.000042332 -0.000181170 -0.000060399 -0.000056203 0.000007956 0.000004006 -0.000021520 -0.000070510 -0.000180737 0.000017366 0.000001083 -0.000001405 -0.000046753 0.000001056 0.000008186 0.000009259 0.000039795 -0.000226142 -0.000401794 -0.000000581 -0.000035333 -0.000127615 -0.000093338 -0.000358632 0.000016258 -0.000030428 -0.000104172 -0.000133866 -0.000287013 0.000000901 -0.000027813 -0.000104220 0.000719033 -0.001056896 0.000061853 0.000042524 0.000484000 -0.002611733 0.000028331 -0.000092045 -0.000089942 -0.000255080 0.001506451 0.002056347 0.000106174 0.000161346 0.000697126 0.000124559 -0.000138407 -0.000048746 -0.000066710 -0.000227836 -0.000658987 -0.000433900 -0.000006354 -0.000022011 -0.000138342 -0.000510779 -0.000634983 -0.000034350 -0.000091733 -0.000364556 0.001058321 0.000117144 -0.000051625 -0.000144662 -0.000336328 -0.002175627 -0.000822318 -0.000033319 0.000080510 0.000006428 0.001033581 0.000740268 0.000083174 0.000129478 0.000102636 -0.000181068 -0.000549099 -0.000057551 -0.000027973 -0.000008891 -0.001571730 0.000225210 -0.000233876 -0.000177757 -0.000544821 -0.000945520 -0.000704515 0.000020589 -0.000059484 -0.000460072 0.717107656 0.096989287 0.197270180 0.010208195 0.159762982 0.683183565 -0.136829804 0.013856186 0.084821063 0.740132544 -0.005719396 -0.083118321 -0.071043401 0.077763172 0.199884288 0.016248425 -0.079057164 -0.335009695 -0.043505707 0.161912987 -0.034687183 0.007849136 0.042241846 -0.044356747 -0.022326883 0.009053249 -0.004733550 -0.005383043 -0.008535836 0.005883091 0.044020110 -0.004508774 -0.043089186 0.000632060 0.017393438 -0.000879998 -0.002348687 -0.003143806 0.000821242 0.000187199 -0.001708534 0.005634680 -0.003018041 0.000196316 -0.000492440 -0.002852378 -0.002701232 -0.001452632 -0.000713967 -0.000365303 -0.213747193 -0.065223642 -0.129751638 0.008807403 0.003181259 -0.063650470 -0.061323040 -0.057075790 -0.005794108 0.000357956 -0.129882566 -0.058233855 -0.168072302 -0.022470469 -0.007907395 -0.002670345 -0.001243489 -0.000616372 -0.314558098 -0.014067965 0.007746702 0.004574923 -0.001206700 -0.014042583 -0.038917876 0.029699285 0.002048187 -0.003553043 0.082457022 -0.003241066 -0.009644955 -0.002201838 0.003036568 0.013150662 -0.008083844 -0.003175939 0.005542077 0.000288494 0.000960695 -0.002989454 -0.001663740 -0.000979773 0.002864440 -0.001467813 -0.012685389 0.002680693 0.000101043 -0.003715571 0.002785294 -0.000635882 -0.002604420 0.000450185 0.002899354 -0.001050045 -0.000203885 0.000194724 0.000073806 0.000701400 0.000365691 0.000758282 0.000345699 0.000077053 0.000177537 0.000027519 -0.000093511 0.000452583 -0.000407132 -0.000281189 0.000376955 -0.000214048 -0.000354443 -0.000228278 -0.000069059 0.001752211 -0.000053243 0.000324292 0.000094018 0.000184719 -0.000317422 -0.000107629 0.000375789 0.000022901 -0.000280479 -0.000158241 -0.000189399 0.000050189 0.000015528 -0.000179337 -0.000060307 -0.000100066 -0.000005059 -0.000003389 -0.000005758 -0.000025996 -0.000013170 -0.000020253 0.000003147 0.000025482 -0.000012963 -0.000012359 0.000097193 -0.000020601 -0.000090987 0.000120299 0.000025997 0.000226856 -0.000020576 -0.000265313 0.000260270 0.000012519 -0.000043549 -0.000027329 0.000056724 -0.000018002 -0.000018128 -0.000074586 -0.000025009 -0.000009390 0.000104450 0.000032280 -0.000397200 -0.000023090 0.000178996 0.000002720 -0.000056639 -0.000068131 0.000044023 0.000026271 0.000076348 -0.000004278 0.000164486 -0.000017880 -0.000011013 0.000099809 0.000011197 -0.000001552 0.000040899 0.000098711 -0.000169367 0.000000373 -0.000024415 -0.000041151 0.000051784 -0.000040682 0.000067211 0.000030053 0.000005651 -0.000020456 -0.000044084 -0.000021253 0.000164798 -0.000006163 -0.000088464 0.000034236 0.000022130 0.000020539 0.000016887 -0.000002534 0.000002267 0.000028180 0.000031322 0.000000625 -0.000032246 0.000042344 -0.000015256 0.000043213 0.000012667 0.000011770 -0.000058491 0.000006295 0.000054087 -0.000017974 -0.000045203 0.000021840 -0.000021069 -0.000039424 0.000000790 0.000008212 0.000016076 0.000003255 0.000040064 0.000008295 0.000030953 -0.000122890 0.000090459 0.000048449 0.000025756 -0.000033600 -0.000015473 -0.000055695 -0.000005948 0.000005553 0.000022223 -0.000006166 0.000006619 -0.000030138 -0.000000144 0.000013636 -0.000005786 -0.000000558 0.000009034 -0.000004786 -0.000007809 0.000002599 -0.000000520 0.000039119 0.000002391 -0.000012630 0.000000231 -0.000003373 -0.000015967 0.000003362 0.000014262 -0.000009155 0.000000876 0.000014912 -0.000002552 -0.000013226 0.000007359 0.000000128 0.000016137 -0.000002914 -0.000016857 0.000017994 0.000000173 0.000003674 0.000001640 0.000005243 -0.000012424 0.000005202 0.000011958 0.000003024 -0.000011225 0.000001489 -0.000014136 0.000012591 -0.000001908 -0.000010144 0.000006369 -0.000001975 -0.002455086 -0.002018393 -0.005730308 0.000486550 0.002261921 -0.002632513 -0.001144504 0.000739260 -0.001562533 0.004643883 -0.007108645 -0.000277243 0.001367851 0.002994560 -0.003169446 0.002162555 0.000546013 0.001100732 -0.001350348 -0.000470006 0.000825694 -0.000028470 -0.000088269 0.001008045 0.000448200 -0.000502334 -0.000466849 -0.000927626 -0.000109864 0.001149172 0.000004918 0.000093076 -0.000003215 -0.000055388 0.000016859 -0.000073145 -0.000018056 -0.000091514 0.000065026 0.000009960 -0.000004078 -0.000006438 -0.000076720 0.000035941 0.000037568 -0.001007414 -0.000126481 0.001088573 -0.000043446 -0.000101050 0.003698550 -0.000403312 -0.003800809 0.001647780 0.001691839 0.001717810 0.000047743 -0.001808852 0.000108145 0.000416947 -0.001146736 -0.000025306 0.000824370 -0.000380492 -0.000105731 -0.002500225 0.000274657 0.001951374 -0.000345253 -0.000706755 -0.004007187 0.000395434 0.003472141 -0.001152029 -0.000929921 0.003015306 -0.000240426 -0.002241507 0.000577016 0.000651251 0.001780692 -0.000158813 -0.001331122 0.000331316 0.000365023 0.000618257 -0.000101302 -0.000372606 0.000048631 0.000109668 -0.002059064 0.000142970 0.001232253 -0.000420648 -0.000276939 -0.000818877 0.000090246 0.000740001 -0.000325238 -0.000104046 0.000338383 0.000049813 -0.000434719 0.000003110 0.000220093 0.000328101 -0.000029445 -0.000135645 0.000107923 -0.000018987 0.000109058 -0.000014235 -0.000090256 0.000080591 -0.000019215 -0.000109904 -0.000014731 0.000131297 -0.000026548 -0.000049007 0.000474431 -0.000021500 -0.000246755 0.000130389 0.000031998 0.000035539 -0.000013105 -0.000115848 0.000053986 0.000004663 -0.000057550 0.000003397 0.000107742 -0.000037316 -0.000033091 0.000286291 -0.000013360 -0.000151444 0.000039658 0.000040288 0.000096462 -0.000016212 -0.000124934 0.000045944 0.000021718 -0.000008959 -0.000018224 0.000031137 0.000013351 -0.000022408 -0.001252666 0.000190267 0.001146998 -0.000518989 -0.000343876 0.000549158 -0.000056393 -0.000408030 0.000130792 0.000097864 0.001719717 -0.000218471 -0.001348888 0.000578563 0.000268828 0.000007590 0.000009925 -0.000019696 -0.000027822 -0.000004170 -0.000387609 0.000024489 0.000305928 -0.000103375 -0.000033329 -0.000683739 0.000095007 0.000522675 -0.000183983 -0.000114225 -0.000131005 0.000014786 0.000026288 -0.000060849 0.000029820 0.000081471 0.000003125 -0.000041545 -0.000001452 0.000017521 0.000041993 0.000000549 -0.000031085 0.000030454 -0.000009756 0.000006303 -0.000002653 -0.000000082 0.000007435 -0.000008945 0.000053170 -0.000005484 -0.000020485 0.000028612 -0.000007539 -0.000049466 0.000003831 0.000040220 -0.000004904 -0.000012554 0.000003287 -0.000001186 0.000011361 0.000002842 -0.000008053 -0.000078980 0.000009683 0.000019242 -0.000032189 0.000019746 0.000042252 0.000001949 -0.000031342 0.000002100 0.000009736 -0.000057748 -0.000000741 0.000045707 -0.000019608 -0.000007894 -0.000008307 0.000001125 -0.000005229 -0.000008377 0.000004759 -0.000032708 -0.000005414 0.000017680 -0.000011863 -0.000005218 0.000038599 -0.000002064 -0.000033863 0.000009495 0.000009079 -0.000023859 0.000002658 0.000017001 0.000017288 -0.000021064 0.000056658 -0.000003250 -0.000046284 0.000033074 -0.000001696 -0.000187333 0.000004525 0.000065916 -0.000060106 0.000007131 0.000108777 0.000021142 0.000035951 -0.000009504 -0.000019836 0.000120841 0.000005270 -0.000038343 0.000036692 0.000003177 -0.000036841 0.000001850 0.000021416 -0.000006947 -0.000003941 -0.000022193 0.000001200 0.000025471 -0.000008079 -0.000005784 -0.000032053 -0.000001253 0.000035030 -0.000008174 -0.000010390 0.000015600 -0.000001808 -0.000013749 0.000005351 0.000001903 0.000061086 -0.000002944 -0.000034881 0.000011272 0.000008289 0.000052506 -0.000001830 -0.000036112 0.000009051 0.000010927 -0.000011923 0.000002017 0.000012433 -0.000004814 -0.000001735 -0.000057206 0.000001946 0.000025354 -0.000005532 -0.000006379 -0.000030804 0.000002069 0.000004242 -0.000001127 -0.000001145 0.000018770 -0.000005101 -0.000014573 0.000010746 0.000000010 0.000023774 -0.000005034 -0.000016929 -0.000010085 0.000000573 0.000100044 -0.000007454 -0.000069160 0.000006109 0.000010638 -0.000022061 0.000005863 0.000017380 -0.000004770 -0.000002862 0.000012350 -0.000002386 -0.000007875 0.000001714 0.000001967 0.000067248 -0.000008742 -0.000049476 0.000024136 0.000007914 0.000012941 -0.000005545 -0.000012090 0.000007456 0.000002129 0.000087151 -0.000007902 -0.000066775 0.000026008 0.000016321 0.000081608 -0.000013672 -0.000062598 0.000018186 0.000019769 0.000021541 0.000003687 0.000012905 0.000000824 -0.000005423 0.000042950 0.000004456 0.000032395 -0.000007939 -0.000010968 0.000020473 0.000002080 -0.000037216 0.000012175 0.000006264 -0.000032876 -0.000008598 -0.000016800 0.000000921 0.000009862 0.000003706 -0.000000523 -0.000035881 0.000029094 0.000010234 0.000066082 -0.000000590 -0.000004328 0.000027329 -0.000000339 0.000024227 -0.000000376 -0.000000724 0.000001690 -0.000005058 0.000079185 0.000009756 0.000003734 -0.000002876 -0.000005309 -0.000040127 -0.000005388 -0.000025323 0.000007003 0.000007892 0.000009647 0.000000821 -0.000022450 0.000015347 0.000010278 0.000054988 0.000006610 -0.000025367 0.000020817 0.000007843 -0.000008872 0.000001181 0.000052784 -0.000028317 -0.000014532 -0.000005560 -0.000003565 -0.000002812 0.000001582 -0.000001716 -0.000091164 -0.000007301 0.000025727 -0.000025237 -0.000002679 -0.000023251 0.000000817 0.000008954 -0.000010721 -0.000000581 0.000030306 -0.000000583 -0.000013835 0.000010496 0.000000773 -0.000025713 0.000001392 -0.000001047 -0.000003676 0.000004012 -0.000063207 -0.000008494 0.000022435 -0.000015812 -0.000004936 0.000084719 0.000017109 0.000002157 0.000021506 -0.000002383 0.000029473 0.000000328 -0.000001253 0.000009267 0.000001196 0.000046067 0.000002971 -0.000019898 0.000026001 0.000007207 0.000031717 0.000015282 0.000028574 -0.000024106 -0.000004192 -0.000012473 -0.000010748 -0.000013974 0.000000448 -0.000002647 0.000116315 0.000020360 0.000006606 0.000010642 -0.000001706 -0.000262400 -0.000010648 0.000153297 -0.000112671 -0.000029407 -0.000021691 -0.000025713 0.000073766 -0.000091241 -0.000049613 0.000285341 0.000026919 -0.000095918 0.000054375 0.000019604 -0.000018330 0.000002277 0.000011058 -0.000007597 0.000000004 -0.000009179 -0.000001931 0.000002008 -0.000002348 -0.000000972 -0.000002978 0.000002182 0.000004105 -0.000002337 0.000000855 -0.000010161 0.000002025 0.000006775 -0.000004134 0.000000398 -0.000003739 -0.000000840 -0.000003962 0.000001267 0.000000835 -0.000005922 0.000001092 -0.000002289 -0.000001573 0.000001510 -0.000112332 -0.000146703 -0.000012152 0.000090210 -0.000027486 0.000029259 -0.000069160 0.000011565 0.000021334 0.000026728 0.000015286 0.000015400 -0.000000432 -0.000034142 -0.000011967 -0.000051689 -0.000071993 0.000029335 0.000024770 -0.000002317 0.000019630 0.000205145 -0.000051782 -0.000097229 0.000026561 0.000083838 0.000055152 -0.000002312 -0.000079484 0.000053852 -0.000347906 -0.000014249 -0.000162406 0.000013316 0.000107507 -0.000239830 0.000260065 -0.000371619 0.000089962 0.000287337 -0.000267060 -0.000161892 0.000049805 0.000153684 -0.000167247 0.000017885 0.000036897 -0.000168516 -0.000002172 0.000071730 -0.000101666 -0.000145648 -0.000233118 0.000102571 0.000034523 -0.000214072 -0.000094021 0.000045703 0.000025170 -0.000125179 -0.000062104 0.000000861 0.000005303 -0.000003956 -0.000043034 0.000005653 0.000005537 0.000143379 -0.000049220 -0.000033492 -0.000050775 0.000040740 0.000089960 -0.000013727 -0.000051770 -0.000017928 -0.000003290 -0.000001697 0.000003991 -0.000003487 -0.000029446 -0.000011839 0.000032896 -0.000014244 -0.000001324 0.000010586 -0.000004846 -0.000000364 0.000011294 -0.000009193 0.000021363 0.000005514 0.000000843 0.000028090 -0.000014635 0.000026148 0.000042958 -0.000020771 -0.000026411 0.000007881 0.000056531 0.000002586 -0.000003181 0.000016953 0.000003590 -0.000565726 0.001270909 0.000336929 -0.000480483 0.000304733 0.003405428 -0.000451003 0.000938626 -0.000409298 0.000059064 0.000882201 0.001203702 -0.002253688 0.000211301 0.000296907 0.000020957 0.000069801 -0.000029407 -0.000049264 0.000035107 0.000055648 -0.000086019 -0.000184113 0.000042931 0.000029806 0.000108384 -0.000041207 0.000148883 -0.000064374 0.000032023 0.000000361 -0.000012040 -0.000009732 0.000021254 -0.000008386 0.000008930 -0.000021416 -0.000029205 0.000034800 0.000000654 -0.000032375 0.000002081 -0.000003788 -0.000022972 -0.000001319 0.000174176 0.000001800 -0.000085466 0.000051956 0.000009450 -0.000046581 0.000009533 -0.000000746 0.000016965 0.000017186 -0.000159345 -0.000012139 0.000043909 -0.000020505 -0.000003338 0.000141147 0.000001256 -0.000106159 0.000086088 0.000020791 0.000013531 0.000018402 -0.000041957 0.000054553 0.000032937 -0.000088209 -0.000015411 0.000009296 -0.000001485 -0.000005416 0.000287280 0.000107191 -0.000625297 0.000133234 0.000087860 -0.002040517 -0.000861609 0.001571961 0.000317320 -0.000369650 -0.000178894 0.000593567 -0.000238366 -0.000030286 -0.000227845 0.000429368 -0.000071055 -0.000443194 -0.000045385 -0.000163752 -0.000173081 -0.000839561 -0.000234709 0.000286974 -0.000049060 -0.000994389 0.000819333 0.000192388 -0.000332366 0.000213056 -0.000010063 -0.000003709 -0.000003167 0.000000294 -0.000000946 -0.000000499 0.000001840 -0.000005252 0.000001115 0.000001870 -0.000000026 -0.000003456 0.000003904 -0.000000009 -0.000002619 0.000020536 0.000008009 -0.000000288 0.000003317 0.000004381 0.000004420 0.000007273 -0.000013801 0.000003070 0.000006129 0.000002982 -0.000010100 0.000012579 0.000000459 -0.000006571 0.000010871 0.000001220 0.000008420 -0.000000126 -0.000001085 -0.000002897 -0.000000645 0.000002151 -0.000001072 -0.000000901 0.000002926 0.000003055 0.000004460 -0.000001889 0.000000488 -0.000004348 -0.000002010 -0.000003778 0.000000967 -0.000000068 -0.000005336 0.000000691 -0.000001926 -0.000000784 0.000000661 0.000002236 -0.000000188 0.000009110 -0.000002458 -0.000002231 -0.000001245 -0.000001327 0.000001991 -0.000000474 -0.000001051 0.000003614 0.000000035 -0.000001725 0.000001378 0.000000507 -0.000000522 -0.000002477 -0.000001031 0.000001158 -0.000000817 -0.000002756 -0.000002718 0.000000185 0.000000356 -0.000001198 0.000001351 -0.000001371 -0.000002052 0.000001490 -0.000000061 0.000001924 -0.000000065 -0.000000240 0.000000517 0.000000081 -0.000009868 -0.000004459 -0.000002820 0.000000113 -0.000001693 -0.000003301 -0.000001360 0.000007399 -0.000002887 -0.000002244 -0.000006764 0.000005762 -0.000007431 -0.000001864 0.000003847 -0.000001587 0.000001194 -0.000007533 0.000002163 0.000002393 -0.000004107 0.000001352 -0.000000042 -0.000001367 0.000000570 -0.000001890 0.000000609 0.000002803 -0.000002144 -0.000000550 0.000000508 0.000003116 -0.000000614 -0.000001106 0.000001332 0.000004434 0.000000243 -0.000005018 0.000003071 0.000001322 0.000001919 -0.000003991 0.000003339 0.000000960 -0.000002452 -0.000001501 -0.000000071 -0.000001732 0.000000200 0.000000323 0.000000945 -0.000001791 -0.000003382 0.000001989 0.000000033 0.000002799 0.000001266 0.000000297 0.000000128 0.000000536 -0.000003889 -0.000008754 0.000018175 -0.000004035 -0.000006562 0.000034582 -0.000006536 0.000008125 0.000011074 -0.000004941 -0.000001271 -0.000002056 0.000004579 -0.000001606 -0.000002161 0.000010106 0.000004649 -0.000005055 0.000001203 0.000001587 -0.000016632 -0.000003302 0.000008776 -0.000005667 -0.000003138 0.000000851 -0.000009674 0.000010670 0.000003871 -0.000006270 0.000003386 0.000005553 -0.000011459 0.000001663 0.000004656 -0.000017716 -0.000000428 0.000001607 -0.000005473 0.000000184 -0.000003519 0.000007150 -0.000004945 -0.000002611 0.000004078 0.000000846 -0.000001734 0.000000174 0.000001162 -0.000000127 -0.000002370 -0.000008852 0.000015704 0.000000056 -0.000006569 -0.000003823 -0.000000078 0.000003797 -0.000001439 -0.000000228 -0.000001791 -0.000001207 0.000005557 -0.000001256 -0.000001385 0.000007799 -0.000001502 0.000002137 0.000001927 -0.000000994 0.000003597 -0.000002881 0.000001290 0.000001861 -0.000001469 -0.000004419 -0.000001310 0.000004269 -0.000001395 -0.000001317 -0.000003325 -0.000002251 0.000004127 -0.000000975 -0.000001695 0.000001061 -0.000001663 -0.000000417 0.000001022 -0.000000634 -0.000004054 -0.000009172 0.000010511 0.000000336 -0.000005256 0.000004349 0.000006733 -0.000009711 0.000000662 0.000005336 -0.000007993 -0.000006097 0.000012788 -0.000002020 -0.000004416 0.000003214 -0.000007417 0.000008111 0.000002283 -0.000005151 -0.000012156 -0.000002718 0.000008726 -0.000004752 -0.000002670 -0.000002801 -0.000003634 0.000009299 -0.000000948 -0.000003406 0.000001967 0.000002120 -0.000000553 -0.000000270 0.000000959 -0.000001418 0.000002619 -0.000003672 -0.000000753 0.000001863 0.000007123 -0.000000359 -0.000003714 0.000002463 0.000000162 -0.000001455 0.000000149 0.000002158 -0.000000703 -0.000000183 -0.000005247 -0.000003404 0.000004930 -0.000000777 -0.000002233 0.000003397 -0.000000370 -0.000002166 0.000001276 0.000000201 0.000158761 0.000050502 -0.000422260 0.000189437 0.000255134 0.000137733 0.000030677 -0.000415979 -0.000176409 0.000384445 -0.000193022 0.000006858 -0.000148344 0.000302354 0.000403505 0.000139420 0.000060089 0.000180258 -0.000699415 -0.000117382 -0.000205039 -0.000101255 0.000279543 0.000380962 -0.000391987 0.000030797 0.000069167 0.000225145 -0.000096897 -0.000425188 0.000008503 0.000012611 -0.000026896 -0.000041844 0.000035577 0.000005410 -0.000001773 0.000012511 -0.000067299 -0.000018648 0.000031520 -0.000016225 -0.000000544 -0.000027658 -0.000056907 -0.000111333 0.000015355 0.000119217 -0.000075582 -0.000039302 0.000046923 0.000002027 0.000146534 -0.000150944 -0.000140464 0.000005810 -0.000012010 0.000150331 -0.000098948 -0.000134518 0.000355374 -0.000002351 -0.000578352 -0.000288434 0.000488823 -0.000353808 0.000055549 0.000634494 0.000878584 -0.001954832 0.000478849 0.000067799 -0.001040939 -0.000632704 0.001152398 -0.000130654 0.000031425 0.000181398 -0.000087036 -0.000218264 -0.000119444 0.000022501 0.000360485 0.000433389 -0.000441779 -0.000338455 0.000027141 0.000606362 0.000337124 -0.000652398 -0.000222295 -0.000016045 0.000059064 -0.000278790 -0.000105272 0.000197919 -0.000019691 -0.000208097 -0.000333002 0.000344438 0.000120945 -0.000056457 -0.000112870 -0.000289220 0.000137304 -0.000034347 0.000000118 0.000320156 0.000641660 0.000335979 -0.000493661 0.000058643 0.000359601 0.000780455 -0.002978957 -0.000386669 -0.000009399 0.000722478 0.000422894 -0.000724881 0.668373110 -0.052567939 0.718390345 0.009540185 0.089266577 0.229912912 0.064329717 -0.010240259 0.152482735 0.721828813 -0.000499773 -0.003274876 -0.001786227 -0.001360074 0.330683630 0.000041238 0.007031386 0.005253273 -0.003877875 0.025482832 -0.001225808 0.030430769 0.002236861 -0.003334074 -0.095613126 0.007284606 -0.000269221 0.000390818 0.001097403 -0.000685434 -0.003306444 0.000487857 -0.000678619 0.000437537 -0.000051438 -0.012512793 0.000860161 0.000163848 -0.000673087 0.000449212 0.083664328 0.000898452 -0.001996479 -0.003215002 -0.000084676 -0.004503079 -0.001883570 0.005396179 -0.002587307 0.000132480 -0.083012116 -0.001371214 -0.002907432 -0.002006629 0.000026679 -0.030305640 -0.009042773 0.016068088 0.051585799 -0.000254238 -0.017935191 0.004378920 0.003684749 -0.007058263 -0.000054855 -0.034307831 0.021376022 -0.012715837 -0.035556877 -0.000041387 -0.002323096 -0.001388017 -0.005302434 -0.013514869 0.000295010 -0.000744391 -0.000310274 0.002983919 0.003893927 -0.000142404 0.002310250 -0.005233119 -0.002051287 -0.002379902 -0.000044365 -0.000180398 -0.000806104 -0.000119978 -0.000281658 0.000002340 -0.000320392 0.000074211 -0.000221107 -0.000497471 0.000017213 -0.000971167 0.000503452 0.000230928 0.000624683 -0.000020122 -0.000210488 -0.000046786 0.000823589 0.001662322 -0.000012922 -0.000127377 0.000276650 -0.000228867 -0.001450674 0.000026902 -0.000302982 0.000739137 -0.000556756 -0.000955091 0.000005478 0.000039743 0.000087924 0.000066866 0.000077387 -0.000001470 -0.000001069 -0.000000842 0.000025784 0.000028562 -0.000000909 0.000097202 -0.000286363 -0.000060141 -0.000144764 0.000004790 0.000048183 -0.000291696 -0.000389665 -0.000763594 0.000015603 -0.000036923 0.000000391 -0.000083464 -0.000024334 -0.000000528 0.000139281 -0.000284489 -0.000069508 -0.000130946 0.000000544 -0.000240027 0.000753978 0.000431305 0.000975131 -0.000009717 -0.000083490 -0.000040790 0.000082294 0.000109125 0.000000235 -0.000147138 -0.000804650 -0.000103821 -0.000237754 0.000007748 0.000003647 -0.000124779 -0.000027324 -0.000061474 -0.000002836 -0.000044875 0.000029339 -0.000030783 0.000134223 -0.000001345 0.000039937 0.000095994 0.000038010 -0.000053140 -0.000000362 0.000110999 -0.000231932 -0.000085056 -0.000220642 0.000005334 0.000015979 -0.000062985 -0.000010358 0.000091157 -0.000000629 -0.000085638 -0.000040456 -0.000135614 -0.000211887 0.000004699 0.000008692 -0.000103486 -0.000027985 -0.000057833 0.000001856 0.000032873 -0.000025648 -0.000035101 -0.000138997 0.000002387 -0.000006571 0.000068484 0.000030465 0.000063623 -0.000002270 0.000210545 0.000089016 0.000058723 -0.000003767 -0.000006077 0.000085629 -0.000085362 -0.000032666 -0.000137526 -0.000001602 0.000012533 -0.000173446 -0.000030446 -0.000053364 -0.000006123 -0.000005281 0.000093556 0.000046276 0.000098635 -0.000001405 0.000007533 -0.000004852 0.000002012 -0.000015231 0.000000184 -0.000003869 -0.000130539 -0.000059256 -0.000124360 0.000002200 -0.000008385 0.000004152 0.000002304 0.000010758 -0.000000854 0.000010662 -0.000012482 -0.000007213 -0.000030745 0.000000577 0.000002233 -0.000041206 -0.000033894 -0.000064052 0.000001556 0.000011507 -0.000014400 -0.000004703 -0.000003741 -0.000000240 0.000012140 -0.000006855 0.000000355 -0.000034548 0.000000471 -0.000004340 -0.000006150 -0.000007898 -0.000014469 0.000001299 0.008894907 -0.216415642 -0.058692250 -0.118393329 0.000793852 -0.001410849 -0.067015866 -0.079879190 -0.055524070 0.000958726 -0.004333295 -0.102034408 -0.042838465 -0.224654644 -0.000457039 -0.000300724 -0.044191696 -0.018913842 -0.014503255 0.000271332 -0.000789302 -0.017709730 -0.008082982 -0.010705131 -0.000055453 0.001505765 -0.018451044 -0.011989517 0.024754968 0.000386162 0.000034368 0.000300810 0.000118193 0.000247244 -0.000023834 -0.000001557 0.000270841 0.000097888 0.000330045 0.000094984 0.000040495 0.000331492 0.000177882 0.000298021 0.000054581 -0.000967730 0.000259543 0.000780544 0.001677766 -0.000042732 0.002944106 -0.002526895 -0.002936288 -0.007049996 0.000173924 0.001315043 -0.000141635 -0.001824231 -0.003613597 0.000077413 -0.000851945 0.002042925 0.001499896 0.002848565 -0.000070475 -0.001122654 0.002140263 0.002410908 0.005259063 -0.000127578 -0.002591238 0.003161158 0.003556836 0.007874400 -0.000196283 0.001887743 -0.003947376 -0.003109986 -0.006494240 0.000160139 0.001047873 -0.002044814 -0.001743632 -0.003612648 0.000101347 0.000365636 -0.000703678 -0.000528794 -0.001291083 0.000026532 -0.001114567 0.004234546 0.002631280 0.005406390 -0.000111454 -0.000497050 0.000054631 0.000326613 0.000899608 -0.000065350 0.000203639 0.000167064 -0.000409949 -0.000385932 0.000047847 0.000161024 -0.000842011 -0.000515031 -0.000941036 0.000023177 0.000091157 0.000082540 0.000016648 -0.000025812 0.000009171 -0.000082807 -0.000064434 0.000095670 0.000076561 -0.000018786 0.000165873 -0.001665565 -0.000611415 -0.001564331 0.000021868 0.000047701 0.000672713 0.000101498 0.000343000 0.000014060 -0.000005389 -0.000262296 0.000037066 -0.000033960 -0.000019206 0.000143418 -0.000746459 -0.000418142 -0.000859395 0.000013937 0.000076877 0.000266415 0.000033895 0.000075862 0.000009530 -0.000005328 -0.000034311 0.000031321 -0.000003879 -0.000007338 -0.000874329 0.000696834 0.000970091 0.002172754 -0.000052575 0.000282585 -0.000557169 -0.000494464 -0.001102265 0.000027575 0.001220519 -0.001512029 -0.001478796 -0.003254153 0.000079562 -0.000006321 0.000089359 0.000003418 0.000005474 0.000000718 -0.000275277 0.000360115 0.000358369 0.000738082 -0.000020672 -0.000452488 0.000610305 0.000548404 0.001238095 -0.000031051 -0.000040840 0.000407223 0.000300907 0.000412206 -0.000014628 0.000013514 -0.000239355 -0.000252315 -0.000291284 0.000010576 0.000033689 -0.000003997 -0.000034807 -0.000023920 0.000007977 0.000005957 -0.000006300 -0.000004902 -0.000005239 0.000000089 0.000028834 -0.000121742 -0.000065423 -0.000133612 0.000003999 -0.000027261 0.000067578 0.000047510 0.000116869 -0.000001448 -0.000006041 -0.000069838 -0.000037906 -0.000053529 0.000000429 -0.000035164 0.000235859 0.000136956 0.000245955 -0.000005672 0.000030166 -0.000078855 -0.000035190 -0.000107649 0.000001680 -0.000015206 0.000118189 0.000074405 0.000141770 -0.000003722 0.000019586 0.000085770 0.000067999 0.000120787 -0.000001048 0.000009484 0.000132355 0.000112420 0.000171093 -0.000005677 0.000029469 -0.000016394 -0.000035837 -0.000062128 0.000004120 -0.000040565 -0.000066904 0.000036262 -0.000000976 -0.000000886 0.000018313 -0.000067669 -0.000035237 -0.000100372 0.000007915 -0.000014747 0.001115740 0.000130437 0.000798651 -0.000006306 -0.000009428 -0.001137638 -0.000364959 -0.000906431 -0.000006709 -0.000041606 -0.000554140 -0.000451287 -0.000778416 0.000013246 -0.000017974 0.000080157 0.000045941 0.000098029 -0.000001858 -0.000013767 -0.000024804 0.000005638 0.000005927 -0.000002404 -0.000019388 -0.000009308 0.000022163 0.000029425 -0.000003907 0.000010365 0.000002909 -0.000006728 -0.000014009 0.000001164 0.000030134 -0.000140972 -0.000083035 -0.000170657 0.000003187 0.000029974 -0.000089820 -0.000065621 -0.000127109 0.000003614 -0.000009077 -0.000017088 -0.000000459 0.000000245 -0.000000868 -0.000027196 0.000180387 0.000094212 0.000194267 -0.000002557 -0.000011944 0.000153033 0.000066749 0.000142668 -0.000000248 0.000020440 -0.000016233 -0.000010825 -0.000023652 0.000000520 0.000022959 0.000022720 -0.000010442 -0.000039843 0.000000479 0.000066061 -0.000096966 -0.000096758 -0.000208249 0.000005090 -0.000016353 -0.000000082 0.000009666 0.000031049 -0.000000681 0.000009984 -0.000021714 -0.000017562 -0.000038172 0.000000447 0.000044474 -0.000062142 -0.000058730 -0.000130065 0.000003222 0.000013997 0.000020709 0.000004298 0.000002637 0.000000104 0.000053954 -0.000097144 -0.000075986 -0.000160178 0.000004731 0.000049474 -0.000062917 -0.000063737 -0.000153520 0.000003544 -0.000008927 -0.000250253 -0.000148245 -0.000188986 -0.000000889 -0.000022331 -0.000570091 -0.000170009 -0.000439064 -0.000003286 0.000021570 0.000077272 -0.000011198 0.000091790 0.000009936 0.000011711 0.000364970 0.000187162 0.000318101 -0.000016301 0.000021179 0.000275101 -0.000006753 0.000168047 0.000008046 -0.000002746 -0.000314745 -0.000106575 -0.000444940 -0.000016395 -0.000002672 -0.000203187 -0.000057884 -0.000209955 -0.000002233 -0.000006827 -0.000671483 -0.000307904 -0.000393117 0.000000505 0.000017642 0.000444581 0.000248497 0.000316046 0.000004130 0.000017812 0.000109226 0.000065005 0.000071100 0.000002377 0.000012948 -0.000209299 -0.000072792 -0.000190753 0.000002680 -0.000028146 -0.000380808 -0.000088146 -0.000209666 -0.000004884 0.000002890 0.000076264 0.000016066 0.000063701 -0.000000122 -0.000008525 0.000453712 0.000196520 0.000409087 -0.000003185 -0.000003456 0.000063797 0.000037155 0.000090132 -0.000000070 0.000007392 -0.000106452 -0.000032771 -0.000104714 0.000001913 0.000000817 0.000183965 0.000060211 0.000153908 0.000001937 -0.000008534 0.000316386 0.000134724 0.000266336 -0.000002988 -0.000010689 -0.000579295 -0.000338594 -0.000648804 0.000023222 -0.000001445 -0.000133756 -0.000032683 -0.000192102 -0.000018606 0.000013094 -0.000089401 -0.000080661 -0.000146449 -0.000003075 -0.000011381 -0.000502055 -0.000296583 -0.000209027 0.000003218 0.000009892 0.000257350 0.000120314 0.000052133 0.000002753 -0.000014615 -0.000805763 -0.000550532 -0.000646312 0.000001407 -0.000067236 0.000682090 0.000379132 0.000727593 -0.000015285 0.000014046 -0.000368865 -0.000031003 -0.000232485 -0.000009690 0.000067028 -0.001301905 -0.000590608 -0.001172584 0.000012349 -0.000006696 0.000036658 0.000017364 0.000044623 -0.000000434 0.000000629 0.000055143 0.000026983 0.000043848 -0.000000443 -0.000003213 -0.000015364 -0.000006064 -0.000007454 0.000000047 -0.000005341 0.000013982 0.000006672 0.000018169 0.000000080 0.000002255 0.000052656 0.000019348 0.000046564 0.000000461 0.000001776 0.000047183 0.000014473 0.000044162 0.000001228 -0.000114670 -0.000247500 -0.000052524 -0.000115434 0.000072126 -0.000029280 -0.000161709 -0.000082807 -0.000172258 0.000004437 0.000005775 -0.000033527 -0.000053152 -0.000072327 -0.000018405 -0.000071166 -0.000015814 0.000034127 0.000014338 0.000006849 0.000148574 0.000299081 0.000081278 0.000212068 -0.000071695 0.000115460 0.000178523 0.000009560 0.000078195 -0.000054190 0.000052324 -0.000376891 -0.000269221 -0.000486983 -0.000063754 0.000165305 -0.000149083 -0.000136746 -0.000392216 -0.000001495 -0.000008998 -0.000096781 -0.000046279 0.000082733 0.000078242 0.000127593 0.000301595 0.000138039 0.000239402 0.000011561 -0.000035310 0.000170519 0.000046741 -0.000015153 0.000037063 -0.000117496 -0.000100888 0.000029975 0.000054908 0.000022231 -0.000009807 -0.000013560 -0.000010775 0.000107193 0.000026771 -0.000069557 -0.000315899 -0.000060924 -0.000263657 -0.000055136 -0.000056767 -0.000104356 -0.000051747 0.000039243 0.000003355 -0.000008499 0.000058581 0.000035832 0.000065761 0.000005828 -0.000037189 -0.000049311 -0.000013071 -0.000025362 -0.000005056 0.000001952 -0.000019965 -0.000000038 -0.000016132 -0.000000535 0.000014118 -0.000023820 -0.000012091 -0.000024792 0.000002237 0.000029402 0.000078380 0.000013900 0.000039180 -0.000013912 0.000024854 -0.000031187 -0.000020718 -0.000052086 -0.000000389 -0.000399041 0.000388019 0.000493143 0.001310671 -0.000183790 0.001195473 0.002225972 0.000421173 0.000341199 -0.000202743 0.000970502 0.000648113 -0.000140540 -0.001245048 0.000039017 0.000067946 0.000066955 -0.000031585 -0.000016473 -0.000056208 0.000034806 0.000039953 0.000003789 -0.000042378 -0.000020140 0.000005644 -0.000200780 -0.000103931 -0.000238071 -0.000072000 -0.000009919 0.000006552 0.000013400 0.000013207 0.000029116 -0.000002607 0.000086816 0.000052847 0.000080894 0.000038063 -0.000000176 0.000074250 0.000033733 0.000064808 -0.000030285 0.000052938 -0.000552565 -0.000265220 -0.000552937 0.000007880 -0.000019706 0.000315356 0.000094857 0.000268669 0.000001104 -0.000035632 0.000789634 0.000343229 0.000723462 -0.000005647 0.000031720 -0.000193098 -0.000150480 -0.000278626 0.000009576 -0.000005980 0.000204870 0.000003474 0.000139099 0.000005644 -0.000016712 0.000557565 0.000227923 0.000470032 -0.000002889 0.000412263 0.000218545 -0.000119638 -0.000367074 0.000055755 -0.001212022 -0.001724855 -0.000197167 0.000186104 0.000115207 -0.000296356 -0.000072014 -0.000004004 0.000216477 -0.000015957 0.000086212 -0.000301696 -0.000245199 -0.000539474 0.000097088 0.000010551 -0.000491864 -0.000199211 -0.000560640 0.000078003 -0.000391955 0.000006724 0.000231863 0.000965712 -0.000059838 0.000002435 0.000087719 0.000047159 0.000082646 -0.000003643 0.000003134 0.000031050 0.000011799 0.000023806 0.000000867 -0.000002191 -0.000015878 -0.000000905 -0.000012729 -0.000002144 -0.000001394 -0.000128604 -0.000080394 -0.000131886 0.000006670 0.000008612 0.000041009 0.000001890 0.000023670 0.000004447 -0.000008158 -0.000063102 -0.000017298 -0.000049290 -0.000004808 -0.000005641 -0.000118029 -0.000052589 -0.000104555 -0.000000709 -0.000001210 0.000007555 0.000003655 0.000008350 0.000000457 -0.000003190 -0.000054958 -0.000026032 -0.000046514 0.000001033 0.000002671 0.000049571 0.000027624 0.000046021 -0.000002026 0.000001245 0.000042200 0.000017882 0.000038334 0.000000772 -0.000005771 -0.000070534 -0.000027356 -0.000057857 -0.000000704 -0.000001027 -0.000002660 0.000002726 -0.000000103 -0.000001032 0.000001065 -0.000011308 -0.000005177 -0.000011838 -0.000000551 0.000000878 0.000017895 0.000010540 0.000015114 -0.000001263 0.000000150 0.000025449 0.000014127 0.000023153 -0.000000777 0.000001343 0.000008469 0.000004523 0.000005863 -0.000000718 0.000000094 -0.000010182 -0.000004549 -0.000009714 -0.000000192 0.000002456 0.000085098 0.000048006 0.000080215 -0.000002587 -0.000004285 -0.000020343 -0.000003278 -0.000012622 -0.000001363 0.000004554 0.000067183 0.000021438 0.000059302 0.000003966 0.000004455 0.000055443 0.000019280 0.000044825 0.000001046 0.000000011 0.000023172 0.000008723 0.000021970 0.000000614 -0.000001455 -0.000009078 -0.000003404 -0.000005785 0.000001117 0.000000366 -0.000009287 -0.000007962 -0.000008778 0.000001480 0.000002708 0.000002191 -0.000002107 -0.000002526 0.000000065 -0.000002036 -0.000020908 -0.000003365 -0.000017639 -0.000001950 0.000001109 0.000018529 0.000008439 0.000016441 0.000000095 0.000002089 0.000018687 0.000009072 0.000014402 -0.000000650 -0.000000428 -0.000023003 -0.000011301 -0.000020745 0.000000096 -0.000012144 -0.000064723 -0.000008100 -0.000048976 -0.000007076 -0.000008857 -0.000219911 -0.000109034 -0.000215950 -0.000000731 -0.000001813 -0.000020645 -0.000001678 -0.000010518 -0.000002682 0.000005080 -0.000035095 -0.000023323 -0.000038205 0.000001324 -0.000006885 0.000047003 0.000035702 0.000055453 -0.000003662 -0.000011669 -0.000066766 -0.000021527 -0.000057511 -0.000001032 0.000007382 0.000029407 0.000001340 0.000019897 0.000003718 -0.000000617 0.000087921 0.000047835 0.000089200 -0.000001217 0.000003020 0.000026301 0.000002265 0.000023108 0.000003196 -0.000000660 -0.000001212 0.000000167 -0.000001876 -0.000000406 -0.000012205 -0.000050504 -0.000011110 -0.000039013 -0.000004553 -0.000003449 -0.000005919 -0.000001915 -0.000002514 -0.000000212 -0.000004134 -0.000022161 -0.000007460 -0.000016779 -0.000000866 -0.000001445 -0.000054302 -0.000023901 -0.000050978 -0.000000703 -0.000000873 -0.000017212 -0.000004951 -0.000016330 -0.000001365 -0.000002955 0.000004940 0.000005467 0.000008145 -0.000000871 -0.000002674 0.000002395 0.000005997 0.000005980 -0.000001357 0.000000407 0.000004670 0.000003093 0.000003477 -0.000000412 -0.000007033 0.000000863 0.000013039 0.000006338 -0.000004317 0.000006195 0.000008723 -0.000008944 0.000001698 0.000003635 -0.000009530 -0.000008734 0.000006310 0.000000586 -0.000003415 -0.000006211 -0.000042477 -0.000011955 -0.000037104 -0.000002736 -0.000005562 0.000024634 0.000023133 0.000033953 -0.000003256 -0.000006915 -0.000027682 -0.000006574 -0.000020649 -0.000002218 0.000000293 -0.000018571 -0.000011065 -0.000017857 0.000000695 0.000002591 0.000019935 0.000007177 0.000017767 0.000000988 0.000002971 -0.000016698 -0.000009841 -0.000019474 0.000000539 -0.000001781 -0.000006162 -0.000002187 -0.000004016 -0.000000243 -0.000003561 0.000015486 0.000012192 0.000017795 -0.000001632 0.000001713 -0.000003092 -0.000002090 -0.000005092 0.000000070 0.000326621 -0.000048553 -0.000192666 -0.000409208 0.000009961 -0.000035026 0.000559628 -0.000133323 -0.000241235 -0.000004313 0.000069147 0.000147614 0.000081795 0.000054785 -0.000011697 0.000162847 -0.000024912 0.000021692 0.000007174 0.000000813 -0.000311573 -0.000122172 0.000125994 0.000242744 -0.000007157 -0.000128492 -0.000194212 0.000048690 0.000173362 0.000002569 -0.000024354 0.000025806 -0.000010268 0.000019721 0.000001068 0.000042997 0.000028504 0.000011760 0.000017897 -0.000000185 0.000047914 -0.000005297 -0.000011384 -0.000058937 0.000000278 -0.000027851 -0.000023073 0.000110943 0.000200979 -0.000006425 -0.000000139 -0.000151514 0.000028542 0.000113606 0.000002818 -0.000067194 -0.000098292 0.000040564 0.000108605 0.000001000 0.000554055 0.000493462 -0.000418154 -0.000268053 0.000006732 -0.000298000 -0.000641210 0.000021909 0.000322593 0.000000563 0.000465560 0.001050534 0.000392038 -0.000542823 -0.000010254 -0.000291377 0.000152666 0.000137261 0.000084885 -0.000006643 0.000044028 -0.000604896 -0.000108321 0.000078019 0.000014413 -0.000161101 -0.000439587 0.000073933 0.000347508 0.000002508 -0.000334302 0.000646044 0.001126656 0.000715346 -0.000020326 0.000128637 0.000558831 -0.000515818 -0.000121117 -0.000007848 -0.000204159 0.000442369 -0.000353038 -0.000100677 0.000010139 0.000082057 -0.000753178 -0.000209472 -0.000282375 0.000008629 -0.000159386 -0.000531629 0.000105751 0.000722804 -0.000018613 0.000044072 -0.000701673 -0.000088117 0.000470832 0.000001809 0.029319200 0.000423246 0.087522743 -0.000368009 -0.000885473 0.222227747 0.000292376 -0.000161374 0.069704379 0.055642428 0.000068374 0.000404101 0.138268246 0.062589388 0.174221745 0.000091511 0.000026422 0.000628914 0.000650838 -0.000159653 -0.000615863 0.000163310 0.000489991 -0.003837890 0.001387822 0.000214788 -0.000028128 -0.000522698 0.001464119 0.000694815 0.000527526 0.001971688 0.000566809 -0.000177314 -0.001015601 -0.000191246 -0.000036003 0.000081635 0.000414293 -0.000616299 -0.000204347 -0.000600278 0.000280226 -0.000575474 -0.000769566 -0.000178381 -0.000518287 -0.000002051 -0.000349740 -0.000594125 -0.000004473 0.000176182 0.000026748 0.000268397 0.000283756 -0.000005361 -0.000288337 -0.000017877 0.000079009 0.000206255 -0.000005700 0.000006329 -0.000006919 -0.000010360 0.000027252 -0.000021455 -0.000022398 -0.000021160 0.000049882 -0.000035724 0.000021945 0.000022872 0.000005893 -0.000012438 0.000037234 0.000008017 0.000135051 -0.000010127 0.000023064 0.000040971 -0.000016688 -0.000053525 -0.000001238 -0.000092663 -0.000018469 0.000001661 -0.000023958 0.000007207 -0.000022201 -0.000040573 0.000004157 0.000003107 -0.000000361 0.000007388 0.000000282 0.000000258 0.000000696 0.000000264 0.000002148 0.000002282 -0.000002618 -0.000010848 -0.000000135 -0.000001012 -0.000009265 -0.000010924 -0.000038687 0.000000894 -0.000018090 -0.000039818 0.000005624 -0.000007857 0.000002503 -0.000000662 -0.000000793 -0.000000209 -0.000033199 0.000003558 0.000009657 -0.000012709 0.000008218 0.000017605 0.000006012 0.000006306 0.000000096 -0.000009486 0.000000476 0.000002556 -0.000003490 -0.000005000 -0.000012893 -0.000013281 0.000001142 -0.000012084 -0.000010776 -0.000001102 0.000004732 -0.000001576 0.000001782 0.000017309 -0.000003350 0.000004194 0.000000528 -0.000006234 0.000006250 0.000007462 0.000003338 -0.000002285 0.000006127 -0.000002714 -0.000002351 -0.000000071 -0.000004225 -0.000003484 0.000001949 -0.000001906 0.000007219 -0.000001022 0.000000889 0.000005201 -0.000004394 -0.000012028 -0.000000116 -0.000010998 -0.000009193 -0.000002497 -0.000002112 -0.000001485 -0.000000889 0.000002821 0.000000878 -0.000004821 -0.000001051 0.000002325 -0.000006577 0.000000412 0.000004377 0.000001671 0.000000044 0.000003455 0.000005346 0.000015579 -0.000003814 0.000005156 0.000022744 0.000009511 -0.000001984 -0.000001833 0.000011631 0.000000517 0.000001451 0.000003809 0.000000697 0.000002622 0.000006300 0.000003467 0.000006107 -0.000000248 0.000000889 0.000001442 0.000003024 -0.000000589 -0.000000315 0.000001844 -0.000001603 -0.000004543 -0.000007870 0.000000157 -0.000001870 -0.000002259 -0.000000946 0.000000915 0.000000830 -0.000000404 0.000002275 0.000000628 -0.000001261 -0.000000360 0.000001852 -0.000002543 -0.000000653 -0.000006107 0.000000223 -0.000000897 -0.000005573 -0.000000095 0.000001044 -0.000000279 0.000000126 0.000002061 0.000001738 -0.000001348 -0.000000573 0.000002324 -0.000001816 -0.000000155 -0.000002160 -0.000000583 -0.000000823 -0.000002283 0.000786125 -0.001497922 0.000140573 0.000078962 -0.000108400 -0.003859905 0.001884212 0.000002372 -0.000665728 0.000205064 0.001856608 0.002573280 -0.000218871 0.000084549 0.000258414 0.000046036 0.000129891 0.000036922 0.000019883 -0.000012628 0.000344940 -0.000992455 0.000110685 0.000130380 -0.000005818 -0.001565071 -0.001879690 0.000095447 -0.000070162 -0.000029013 0.000032020 0.000023783 -0.000024441 -0.000043501 0.000017251 -0.000086166 0.000073379 0.000020683 -0.000018393 0.000000813 -0.000019369 0.000064629 -0.000008945 -0.000060534 0.000007717 0.000036195 0.000023588 0.000022345 0.000074286 0.000029233 -0.000160551 -0.000194089 -0.000033860 -0.000162131 -0.000254396 -0.000080354 -0.000078186 -0.000017415 -0.000083864 -0.000095655 0.000127842 0.000102545 0.000010838 0.000072306 0.000048300 0.000145702 0.000168709 0.000033397 0.000105057 0.000146055 0.000175558 0.000234044 0.000055042 0.000182814 0.000275356 -0.000222816 -0.000223909 -0.000044915 -0.000117884 -0.000137457 -0.000131166 -0.000132034 -0.000032983 -0.000083714 -0.000086127 -0.000015950 -0.000038498 -0.000011885 0.000005041 -0.000032272 0.000191567 0.000210621 0.000016688 0.000047156 0.000083519 0.000063916 0.000047352 0.000033776 0.000076081 0.000059628 -0.000127455 -0.000031383 -0.000007581 -0.000086744 -0.000000302 -0.000055900 -0.000051025 0.000001112 0.000000883 -0.000014132 0.000008088 0.000007387 -0.000011513 -0.000017544 -0.000008655 0.000037153 0.000002058 0.000008046 0.000039281 -0.000001895 -0.000036977 -0.000072105 0.000002082 -0.000002090 -0.000025873 -0.000020570 0.000002896 -0.000007479 -0.000018234 -0.000010252 0.000043487 0.000001494 0.000000753 0.000021540 0.000005998 -0.000024398 -0.000030733 -0.000000910 -0.000003837 -0.000009070 -0.000005600 0.000001069 -0.000007320 -0.000013676 -0.000009105 0.000025588 0.000003377 0.000000582 0.000017722 -0.000004632 0.000018099 0.000054222 0.000014289 0.000040186 0.000105551 -0.000024828 -0.000036059 -0.000009453 -0.000015999 -0.000030711 -0.000046270 -0.000093283 -0.000027801 -0.000034242 -0.000120922 0.000000989 0.000000585 -0.000000301 -0.000003898 -0.000003332 0.000016124 0.000024478 0.000008262 0.000015561 0.000024648 0.000014706 0.000036750 0.000014821 0.000008236 0.000041304 0.000053538 0.000037191 -0.000005420 -0.000005728 0.000006276 -0.000051705 -0.000028856 0.000007535 0.000002162 -0.000001142 -0.000013379 -0.000001170 -0.000004721 -0.000014729 -0.000000188 0.000003453 0.000001623 -0.000000777 0.000000388 -0.000000670 -0.000009595 -0.000008479 -0.000000360 -0.000001139 -0.000002692 0.000000394 0.000004526 -0.000000098 -0.000000671 0.000003442 -0.000007212 -0.000006161 0.000002040 0.000003856 -0.000000335 0.000014745 0.000013689 -0.000000749 -0.000003833 0.000003741 0.000003594 0.000001504 -0.000002685 -0.000006657 0.000000010 0.000004151 0.000007827 0.000000805 0.000004972 0.000003872 0.000003346 0.000004857 -0.000001238 -0.000002228 0.000002222 0.000018178 0.000009246 -0.000001157 0.000005201 0.000001481 -0.000006066 -0.000000462 -0.000001179 -0.000003240 -0.000001401 -0.000005252 -0.000008336 0.000002705 0.000002669 -0.000002471 -0.000030908 -0.000018023 0.000000889 -0.000005259 -0.000004425 0.000019473 0.000055388 -0.000003299 -0.000005036 0.000015018 0.000026242 -0.000011507 0.000001578 0.000012619 -0.000001077 -0.000029908 -0.000016371 0.000004488 -0.000001191 -0.000008400 0.000002882 0.000004407 0.000000315 0.000000812 0.000001432 0.000003203 0.000001040 0.000001196 0.000003423 0.000001527 0.000007735 0.000002014 0.000001415 0.000006572 0.000001052 -0.000000776 -0.000000447 -0.000000768 -0.000001151 -0.000000936 -0.000006435 -0.000007677 -0.000000155 -0.000001471 -0.000002290 -0.000007502 -0.000004889 -0.000000678 -0.000003570 -0.000001573 -0.000000328 -0.000000652 0.000000844 0.000001080 0.000000993 0.000004945 0.000006801 -0.000000083 -0.000000259 0.000001277 0.000000368 0.000004203 -0.000000845 -0.000003398 0.000000785 0.000001248 -0.000000219 -0.000000715 0.000001264 -0.000000828 0.000001953 0.000001006 -0.000000617 0.000001569 -0.000001753 -0.000004837 -0.000006167 -0.000001945 -0.000002445 -0.000005465 -0.000001581 0.000000337 0.000000702 -0.000001177 0.000001912 -0.000001161 -0.000000926 0.000000166 0.000000522 -0.000000571 -0.000002038 -0.000003941 -0.000000937 -0.000001575 -0.000005193 0.000002828 0.000001199 -0.000000666 0.000000768 -0.000001470 -0.000004598 -0.000005851 -0.000001906 -0.000003413 -0.000004729 -0.000002129 -0.000003856 -0.000001486 -0.000001070 -0.000004925 -0.000017161 -0.000023641 0.000004056 0.000006150 -0.000000754 0.000020830 -0.000018859 0.000005593 0.000013827 -0.000001879 -0.000021560 0.000011840 -0.000003835 -0.000012028 0.000000582 0.000008699 -0.000001127 -0.000005181 -0.000004865 -0.000000078 -0.000082744 -0.000025862 -0.000000013 -0.000011036 0.000000124 -0.000006939 -0.000048594 0.000007975 0.000009197 -0.000004833 0.000025409 0.000000064 0.000000187 0.000005107 -0.000001926 0.000025611 -0.000003750 0.000001671 0.000003126 -0.000001739 -0.000006301 0.000022559 -0.000005440 -0.000009196 0.000001483 -0.000024548 -0.000005579 -0.000000356 -0.000007402 0.000000874 -0.000019781 -0.000012998 0.000001726 -0.000006195 -0.000000601 0.000039299 -0.000000678 0.000003425 0.000015504 0.000000019 -0.000001455 0.000000960 -0.000000750 0.000001088 -0.000000750 0.000013039 0.000025339 -0.000003657 0.000002133 0.000002839 0.000007207 0.000011567 -0.000001475 -0.000000538 0.000001666 -0.000000045 -0.000003971 0.000000205 -0.000000351 -0.000001539 -0.000011353 0.000008919 -0.000001353 -0.000005201 0.000002098 0.000005339 0.000010141 -0.000001115 0.000005521 0.000000623 -0.000068756 -0.000027018 0.000008299 -0.000000387 -0.000000656 0.000058169 -0.000002700 0.000002589 0.000006190 -0.000002811 -0.000066459 -0.000041383 0.000006316 -0.000003123 -0.000001111 -0.000011282 0.000003919 0.000002157 -0.000000012 0.000003014 0.000016962 0.000000710 -0.000001782 0.000002060 -0.000002378 -0.000011211 -0.000032933 0.000007000 0.000001493 -0.000002231 0.000066975 0.000061944 -0.000002451 0.000023311 0.000010606 0.000094932 0.000013941 0.000000461 0.000041383 -0.000000711 -0.000059083 -0.000074154 0.000008686 -0.000013147 -0.000002496 -0.000001161 0.000003118 0.000000320 -0.000000600 0.000001545 0.000001241 0.000002259 -0.000000330 0.000000903 0.000000112 -0.000001477 -0.000000232 0.000000410 -0.000000646 0.000000754 -0.000000844 0.000001205 0.000000261 -0.000000658 0.000000873 0.000000750 0.000003689 -0.000000919 -0.000001075 0.000000007 -0.000002332 0.000004147 -0.000000797 -0.000002544 0.000000844 -0.000056221 0.000041107 0.000065634 0.000133767 -0.000028012 -0.000018059 -0.000017689 0.000025478 0.000035599 -0.000025097 0.000009531 -0.000024556 -0.000008530 -0.000016425 0.000004267 0.000002601 0.000024228 0.000023489 0.000091291 -0.000032178 0.000064765 -0.000037475 -0.000052957 -0.000104424 0.000022897 0.000035460 -0.000033940 -0.000044686 -0.000116338 0.000009777 0.000032448 -0.000072535 0.000036116 0.000231310 0.000020202 -0.000051312 -0.000028632 -0.000026216 -0.000027166 -0.000212737 -0.000050743 0.000031553 0.000172436 0.000198173 -0.000033571 -0.000006695 0.000052115 -0.000015972 -0.000116604 0.000012622 0.000069548 0.000076594 0.000026784 0.000077104 0.000001344 -0.000009685 0.000050184 0.000003819 0.000151506 -0.000015843 -0.000004814 -0.000032729 -0.000008130 0.000044491 0.000003456 0.000028987 -0.000077139 0.000027347 0.000117966 -0.000018013 -0.000027487 -0.000009077 0.000014366 0.000045354 -0.000016996 -0.000000365 0.000012159 0.000003404 0.000008360 -0.000002306 0.000001609 -0.000006037 0.000008688 0.000027337 -0.000005098 0.000003281 -0.000001767 0.000001792 0.000007569 -0.000002049 -0.000000990 -0.000000400 -0.000001214 -0.000009229 -0.000000728 0.000008085 -0.000009648 -0.000013473 -0.000067337 0.000014259 0.000000141 -0.000004959 -0.000004371 -0.000021396 -0.000001435 0.000137115 -0.000100660 0.000610105 -0.000969820 -0.001126437 0.000200976 -0.000055084 -0.001001908 -0.002187092 0.001605797 0.000068940 0.000072833 -0.001360257 0.000473530 0.000773548 0.000023771 -0.000064695 -0.000036908 -0.000073877 0.000029127 0.000054729 -0.000012198 -0.000020237 0.000013050 0.000009297 0.000025365 -0.000051115 -0.000005807 -0.000035576 0.000015488 -0.000020591 0.000022595 0.000007591 0.000022087 -0.000003694 -0.000033592 0.000057866 0.000008446 0.000017948 -0.000003069 0.000069202 -0.000006649 -0.000009351 -0.000006426 0.000003245 -0.000024260 -0.000037465 0.000001726 -0.000005968 -0.000006876 -0.000025844 0.000008596 -0.000001155 -0.000013638 0.000002735 0.000026146 0.000046594 -0.000006314 0.000002170 0.000001636 -0.000038046 -0.000033543 -0.000000470 -0.000016774 -0.000009222 -0.000061065 -0.000006731 -0.000000263 -0.000026500 0.000001601 0.000017606 0.000024552 -0.000004474 0.000002573 -0.000002193 -0.000021770 0.000048316 -0.000476992 0.000132060 -0.000015277 -0.000149965 0.000015612 0.001280976 0.000622448 -0.000278160 -0.000039092 -0.000036110 0.000216804 0.000179570 -0.001332547 -0.000055891 0.000061163 -0.000594273 0.000296619 0.000829912 -0.000064697 0.000038399 0.000102944 0.000596097 -0.000221161 -0.000000630 -0.000054266 0.000371907 -0.000472410 -0.000695461 0.000017806 0.000011908 -0.000001763 0.000000891 -0.000000673 0.000000077 0.000003237 -0.000000834 -0.000003586 0.000000588 0.000004464 -0.000001261 0.000000523 0.000004367 -0.000001118 -0.000039241 -0.000021820 0.000003858 -0.000004383 0.000001253 -0.000015851 -0.000000353 -0.000001476 -0.000010530 0.000002022 0.000007894 -0.000007189 0.000002828 0.000013658 -0.000002974 -0.000011576 -0.000012764 0.000003208 0.000003524 -0.000000196 0.000000948 0.000000015 -0.000000235 0.000000878 -0.000000183 -0.000007855 -0.000005061 0.000001225 -0.000000760 0.000000648 0.000011282 0.000008457 -0.000001284 0.000000112 -0.000000066 0.000002300 0.000004555 -0.000001138 -0.000002086 0.000000392 -0.000003099 -0.000007245 0.000001774 0.000003587 -0.000000461 0.000003937 0.000000279 0.000000090 0.000001752 -0.000000350 -0.000000578 -0.000000875 0.000000360 -0.000000045 -0.000000011 0.000005036 0.000001606 -0.000000259 0.000001752 -0.000000666 0.000005553 0.000002357 -0.000000452 0.000002010 -0.000000620 0.000002247 0.000001086 -0.000000073 0.000000749 -0.000000298 -0.000000742 -0.000000706 0.000000242 0.000000289 0.000000000 0.000018582 0.000012189 -0.000002212 0.000001608 -0.000000698 0.000004067 -0.000002477 0.000000382 0.000003172 -0.000000553 -0.000002171 0.000006004 -0.000002319 -0.000008714 0.000001857 -0.000001035 0.000005187 -0.000001029 -0.000003864 0.000000497 0.000000379 0.000001221 -0.000000563 -0.000001937 0.000000260 0.000000288 -0.000000830 -0.000000310 0.000000079 0.000000241 -0.000004752 -0.000001766 -0.000000111 -0.000002939 0.000000666 -0.000003276 0.000001626 0.000000251 -0.000001061 0.000000177 0.000004248 -0.000001416 0.000000808 0.000004992 -0.000001080 0.000001959 0.000002460 -0.000000560 -0.000000713 0.000000176 0.000003215 0.000002948 -0.000000407 0.000000670 -0.000000245 -0.000003465 -0.000002180 0.000000643 -0.000000591 0.000000220 0.000014740 -0.000007200 0.000002240 0.000012908 -0.000002313 -0.000029019 -0.000022698 0.000008573 0.000016069 -0.000003244 0.000006982 -0.000000378 0.000000134 0.000003016 -0.000000432 -0.000008688 -0.000003689 -0.000000035 -0.000003600 0.000000422 0.000016214 0.000005030 -0.000000683 0.000005813 -0.000000644 -0.000003716 -0.000005573 0.000004923 0.000015493 -0.000002803 -0.000007768 0.000003326 -0.000001518 -0.000008601 0.000001598 0.000016345 0.000009307 -0.000002670 -0.000002281 0.000000555 -0.000006673 0.000002178 -0.000001606 -0.000008560 0.000001987 0.000000611 0.000000163 0.000000546 0.000001437 -0.000000252 0.000003999 -0.000005253 0.000003492 0.000013912 -0.000002734 -0.000000429 -0.000000686 0.000000436 0.000000959 0.000000153 -0.000000404 -0.000002450 0.000000886 0.000003006 -0.000000375 -0.000004081 -0.000005706 0.000001665 0.000003309 -0.000000608 0.000001058 -0.000001513 0.000001050 0.000003446 -0.000000919 0.000002727 0.000000293 0.000000220 0.000002031 -0.000000392 0.000004367 0.000000453 0.000000354 0.000002923 -0.000000584 0.000001587 0.000000545 0.000000190 0.000001289 -0.000000471 0.000011557 -0.000000326 0.000001591 0.000010454 -0.000002318 -0.000009854 0.000001123 -0.000001149 -0.000009644 0.000002019 0.000007861 -0.000001662 0.000001776 0.000009012 -0.000001693 0.000001920 -0.000004188 0.000002691 0.000010815 -0.000002389 0.000012690 0.000002979 -0.000000504 0.000003830 -0.000000517 0.000001313 -0.000003375 0.000001712 0.000006777 -0.000001384 -0.000004246 -0.000002098 0.000000113 -0.000001608 0.000000386 0.000000287 0.000002276 -0.000001062 -0.000003761 0.000000968 -0.000002723 -0.000001163 0.000000231 -0.000000137 -0.000000109 -0.000000445 -0.000000813 0.000000292 0.000000560 0.000000013 0.000005603 0.000001356 0.000000364 0.000003857 -0.000000933 -0.000000355 -0.000000100 0.000000030 -0.000000119 -0.000000063 -0.000008911 -0.000008470 -0.000001859 -0.000014068 -0.000017297 0.000003823 0.000002712 0.000017039 -0.000048442 -0.000034066 0.000017891 0.000001693 0.000020112 0.000013398 -0.000027704 -0.000004041 0.000003865 0.000012588 -0.000017979 -0.000003503 0.000005721 0.000003646 0.000001569 0.000049492 0.000014666 -0.000007234 -0.000003371 -0.000012104 -0.000037611 0.000002074 -0.000003923 -0.000000762 -0.000000374 -0.000000290 0.000002948 -0.000001681 0.000003910 -0.000001676 0.000008564 0.000009201 0.000001399 0.000000665 0.000000098 0.000017654 0.000000097 0.000005405 0.000005343 0.000001822 0.000024314 0.000014358 -0.000002874 -0.000001299 -0.000005542 -0.000011720 0.000006760 -0.000003027 0.000001412 -0.000006000 -0.000007127 0.000010238 0.000017178 -0.000007131 -0.000007167 -0.000007062 0.000012215 -0.000027009 -0.000013002 -0.000011853 -0.000060594 0.000000446 0.000027544 0.000007024 0.000005209 -0.000011097 -0.000006697 0.000007111 0.000011864 -0.000001078 0.000000407 0.000006659 -0.000022487 -0.000008201 -0.000010541 -0.000032565 -0.000005622 -0.000007285 0.000004147 -0.000007426 0.000002913 0.000007396 0.000045210 0.000029527 -0.000005636 0.000011987 0.000015854 0.000015722 0.000046132 0.000001855 0.000032222 0.000030216 -0.000028982 -0.000004540 0.000008830 0.000035270 0.000006766 -0.000018219 -0.000017338 -0.000010173 -0.000035027 -0.000036343 0.000028195 -0.000016812 0.000010605 0.000036234 0.000000222 -0.000009605 -0.000013975 -0.000018123 -0.000053084 -0.000005185 0.331683245 0.014583619 0.027955569 -0.092850011 0.006138494 0.084626437 0.000602263 0.001121137 0.000998969 0.885991176 0.001179346 -0.003054218 0.001256846 0.033148227 0.174593509 0.000990807 0.001336228 0.000303596 -0.058892453 0.200695443 -0.000569560 -0.000815987 -0.000568964 -0.372292011 0.023456121 -0.000068809 -0.000397972 -0.001072328 -0.004788119 -0.060561550 0.000437672 -0.000187761 -0.001316287 0.134653553 -0.053602977 0.000946388 0.000006971 0.000115108 -0.029096278 -0.011130025 0.000075105 0.000854818 -0.000714614 0.013711147 0.006421082 -0.000266088 -0.000533195 -0.001679449 0.015623581 0.008260668 0.000463326 0.000117310 0.000151459 0.001057619 0.008241744 0.000157869 -0.000034769 0.000234864 0.010479501 0.001577795 -0.000095477 -0.000023241 0.000014495 0.020348689 -0.002291690 0.000008684 0.000008036 -0.000001359 0.000596780 -0.000102931 0.000004530 0.000005213 -0.000001366 -0.000237823 -0.000083127 -0.000000477 0.000018298 0.000008838 -0.000644615 0.000185812 -0.000015888 0.000001077 0.000003419 0.002351943 -0.000818735 -0.000007393 0.000029308 -0.000013182 -0.000282944 0.001455134 -0.000032857 0.000010539 -0.000022891 -0.003850326 -0.001319230 -0.000079588 -0.000010941 -0.000023901 -0.004870419 -0.000642641 0.000005944 -0.000035120 0.000035698 -0.002612312 0.000433154 0.000161822 0.000057268 0.000069960 -0.004942101 0.000130768 0.000054698 -0.000005905 0.000016028 -0.000400969 0.000268312 0.000000352 0.000018849 -0.000020859 -0.000352784 -0.000078024 0.000015436 0.000006807 0.000010932 0.001554278 0.000054515 0.000006526 0.000015886 0.000018294 0.001343964 0.000698968 0.000014037 -0.000017208 0.000001625 -0.000354981 0.000285453 -0.000011010 -0.000004358 0.000000767 0.000312103 0.000266288 0.000032236 -0.000002235 0.000023219 0.000384100 0.000215196 -0.000010916 0.000033713 -0.000002429 0.000911384 -0.000153139 -0.000020241 -0.000013522 -0.000008232 -0.000265728 -0.000021156 -0.000000605 -0.000002801 -0.000010371 0.001336818 0.000389417 0.000005431 0.000001111 0.000003232 0.000502526 -0.000292018 -0.000001340 -0.000002698 0.000000965 -0.001093619 -0.000529113 -0.000008214 -0.000004505 -0.000005302 -0.000116453 0.000007522 -0.000000396 0.000004739 0.000000473 0.000132195 0.000018814 0.000019449 0.000006707 0.000010296 -0.000006128 0.000071323 -0.000002559 -0.000005795 -0.000005687 0.000009187 -0.000019553 -0.000000928 0.000005000 0.000000529 0.000111092 -0.000134085 0.000004976 0.000004407 0.000009055 -0.000160843 -0.000064807 0.000001293 0.000000012 0.000000015 0.000062632 0.000008337 0.000000569 0.000002146 0.000002808 0.000181172 0.000032063 0.000005496 0.000003405 0.000005604 -0.000013576 0.000012815 -0.001839289 -0.000637071 -0.001047901 -0.011730847 0.000778731 -0.000619058 -0.000354051 -0.000213824 -0.003595266 -0.000816204 0.000250131 0.000019232 0.000396308 0.007294291 0.001494600 0.000245352 0.000151090 -0.000071377 0.005028915 -0.000994658 0.000512661 0.000189939 0.000176494 0.006828155 -0.000743546 -0.000413099 -0.000112027 -0.000247452 -0.000648414 -0.000150709 -0.000008261 -0.000016687 0.000008540 -0.000156682 0.000033052 0.000012719 -0.000004992 -0.000002683 0.000207287 -0.000037282 0.000005180 -0.000003564 0.000012130 0.000121651 -0.000055306 0.000022311 0.000070333 -0.000119720 -0.014584888 0.010667202 -0.000268909 0.000026079 0.000637130 0.043739545 -0.016116907 -0.000173057 -0.000140496 0.000407024 0.018526148 -0.003159993 -0.000096490 -0.000073979 -0.000150058 -0.010946466 0.003263305 -0.000208909 -0.000160399 -0.000334815 -0.023318793 0.005885992 -0.000139514 -0.000367213 -0.000584501 -0.039978174 0.011663414 0.000247866 0.000416525 0.000359920 0.024867157 -0.005716555 0.000176815 0.000264311 0.000225303 0.014634856 -0.002020812 0.000059870 0.000177808 0.000061254 0.005890108 -0.001545481 -0.000251090 -0.000332910 -0.000199339 -0.014946441 0.002833927 -0.000098508 -0.000151779 -0.000132171 -0.004878622 0.002144709 0.000024009 -0.000049003 0.000088528 0.002296214 -0.000181059 0.000055810 0.000075712 0.000016515 0.002137508 -0.000466343 0.000021760 0.000043477 0.000014994 0.000832880 -0.000328496 -0.000016349 -0.000000526 -0.000022732 -0.000610484 0.000115574 0.000070418 0.000071080 0.000047510 0.002166951 -0.000994991 0.000000150 0.000001766 0.000021989 0.000344147 -0.000267628 -0.000009551 0.000003360 -0.000021145 -0.000035065 0.000558354 0.000035891 0.000042537 0.000025671 0.002088174 -0.000322155 0.000008095 0.000018424 0.000021640 0.000641099 -0.000297240 -0.000001046 0.000016161 -0.000006634 -0.000017213 -0.000015256 -0.000022474 -0.000113206 -0.000170360 -0.011620223 0.003473693 0.000042712 0.000059028 0.000060355 0.004272837 -0.000743837 0.000095015 0.000287151 0.000194086 0.015684025 -0.005035897 0.000005520 -0.000003979 0.000016241 0.000154020 -0.000076212 -0.000034166 -0.000060386 -0.000056836 -0.003137210 0.000843377 -0.000040680 -0.000123644 -0.000064572 -0.005637732 0.001520035 -0.000029621 -0.000033434 0.000000122 -0.000509367 0.000116539 0.000012407 -0.000001610 0.000005690 0.000416476 -0.000027867 0.000013942 0.000016373 0.000002463 0.000191854 -0.000110134 0.000001950 0.000005703 -0.000000283 0.000068894 0.000000555 0.000011005 0.000016158 0.000002089 0.000310832 -0.000099416 -0.000001686 -0.000003942 -0.000007587 -0.000449685 0.000113814 0.000002131 0.000001677 -0.000002691 -0.000021357 0.000025102 -0.000015813 -0.000023763 -0.000001023 -0.000505249 0.000090007 0.000004056 0.000005123 0.000005665 0.000405147 -0.000063729 -0.000010329 -0.000004401 -0.000011693 -0.000225739 0.000063033 -0.000004174 -0.000001688 -0.000001299 -0.000049746 -0.000012688 -0.000009611 0.000001674 -0.000007601 -0.000070874 -0.000103841 0.000003034 0.000004277 0.000004911 0.000270287 -0.000086599 0.000001293 -0.000003106 -0.000001759 -0.000539307 -0.000056996 0.000008705 0.000008953 0.000005774 0.000102178 -0.000278616 -0.000034067 -0.000028768 -0.000014994 -0.000011366 0.000445907 0.000022394 0.000014266 0.000004931 0.000270038 -0.000682350 0.000028907 0.000002643 0.000020080 0.000245374 -0.000250959 -0.000005104 -0.000005686 -0.000003786 -0.000238958 0.000052108 -0.000002892 -0.000002156 -0.000005205 -0.000110337 0.000034832 -0.000004332 -0.000001140 -0.000007116 -0.000166532 0.000039509 0.000001975 0.000003099 0.000002494 0.000101248 -0.000028211 0.000007979 0.000009191 0.000005957 0.000418658 -0.000080596 0.000005953 0.000006676 0.000005824 0.000390124 -0.000074661 -0.000001193 -0.000002654 -0.000002390 -0.000085418 0.000028083 -0.000007525 -0.000008608 -0.000004005 -0.000421832 0.000055591 -0.000004222 -0.000005886 -0.000000588 -0.000242380 0.000007992 -0.000002089 0.000005889 -0.000002755 0.000169937 -0.000030523 -0.000000900 0.000009977 0.000002132 0.000515662 -0.000245056 0.000010982 0.000020217 0.000014913 0.000927961 -0.000335228 -0.000000210 -0.000006795 -0.000001408 -0.000247045 0.000082932 -0.000001084 0.000003112 -0.000001193 0.000192910 -0.000067005 0.000005241 0.000012400 0.000008017 0.000606433 -0.000182400 -0.000001162 0.000005253 0.000000390 0.000124993 -0.000052131 0.000009031 0.000012854 0.000011431 0.000539772 -0.000141702 0.000002745 0.000013888 0.000005687 0.000830396 -0.000224047 0.000004535 0.000001039 -0.000000972 0.000044881 0.000011998 0.000008393 0.000005426 -0.000002448 0.000156814 -0.000028649 0.000004999 0.000001607 0.000006475 0.000090418 -0.000032600 -0.000006635 -0.000002993 0.000001472 -0.000131995 0.000034788 0.000003095 -0.000003078 0.000004731 -0.000083790 0.000055513 0.000013744 0.000007621 0.000000981 0.000195327 -0.000049671 0.000004846 0.000005780 0.000001315 0.000126763 -0.000053680 0.000016530 0.000008946 0.000005910 0.000299822 -0.000104103 -0.000006903 -0.000005158 0.000002358 -0.000154997 0.000055454 0.000003019 -0.000002473 0.000003066 0.000020183 0.000036547 0.000013925 0.000001942 0.000007213 0.000128081 0.000017550 -0.000004571 0.000002524 -0.000008753 0.000086369 -0.000064390 -0.000001998 0.000001571 -0.000000255 -0.000009976 -0.000020813 -0.000020505 -0.000007637 -0.000008538 -0.000260003 0.000038719 -0.000004813 -0.000002938 -0.000002255 -0.000050393 0.000020671 0.000006088 0.000004437 0.000003108 0.000109112 -0.000032778 -0.000004102 -0.000005314 -0.000000913 -0.000105873 0.000051787 -0.000015054 -0.000003237 -0.000007240 -0.000175124 0.000007313 0.000020923 0.000004154 0.000004652 0.000220604 -0.000015589 0.000006015 0.000003946 0.000000465 0.000093507 -0.000031314 0.000009791 0.000000958 0.000002112 0.000106457 -0.000002839 0.000005933 0.000000720 -0.000000952 0.000171232 -0.000073660 -0.000005410 0.000003694 -0.000001540 0.000000198 -0.000041154 0.000025359 0.000008304 0.000007358 0.000291717 -0.000059430 -0.000063609 -0.000019194 -0.000041372 -0.000458906 -0.000082283 -0.000027248 0.000029625 -0.000032295 0.000900687 -0.000615383 0.000062794 0.000019469 0.000024191 0.000976107 -0.000104500 -0.000003261 -0.000003541 -0.000002378 -0.000067045 0.000020787 -0.000002637 0.000000104 -0.000001515 -0.000003530 -0.000008043 0.000000070 -0.000001889 -0.000000339 -0.000029312 0.000020311 -0.000001381 -0.000002608 -0.000000796 -0.000057678 0.000023912 -0.000000669 -0.000000227 0.000000742 -0.000021072 0.000006467 -0.000000969 -0.000001367 -0.000000010 -0.000014318 0.000004965 0.000008148 0.000018962 -0.000034489 0.000101920 -0.000003717 0.000000823 0.000005745 0.000004102 0.000088777 -0.000016821 -0.000007610 -0.000011403 0.000006560 -0.000062880 0.000018084 -0.000013731 -0.000016166 -0.000013505 -0.000240593 0.000057939 -0.000002271 -0.000009161 0.000018242 -0.000022579 -0.000003869 0.000004284 -0.000003510 0.000023864 0.000069889 -0.000026323 -0.000016177 0.000011159 -0.000065667 -0.000329593 0.000107903 0.000026221 0.000018235 -0.000027216 0.000228492 -0.000044564 -0.000001744 -0.000000109 -0.000016100 0.000043364 -0.000010433 0.000012432 -0.000005183 0.000026514 0.000293621 -0.000075360 0.000014187 -0.000002158 -0.000043232 0.000082453 -0.000031778 0.000010792 0.000002978 -0.000038279 0.000065592 -0.000016230 0.000010229 0.000007336 -0.000020580 0.000093547 -0.000015175 -0.000016718 0.000005253 -0.000015543 -0.000382495 0.000100889 -0.000006369 0.000001034 -0.000011673 -0.000097755 0.000032586 -0.000002274 -0.000003282 -0.000001478 -0.000046053 0.000005197 -0.000007588 -0.000007537 -0.000005685 -0.000172524 0.000049182 0.000001806 0.000006506 0.000000144 0.000058196 -0.000021413 0.000006898 0.000008912 0.000004416 0.000087787 -0.000028032 -0.000005622 -0.000017822 0.000023889 0.000029372 -0.000000820 0.000010096 0.000018704 0.000005820 0.000173652 -0.000055616 -0.000228360 -0.000426800 0.000779721 -0.001015590 0.000125874 0.000160957 0.000264158 -0.000057674 0.002055936 -0.000685486 0.000229735 0.000464474 -0.000546784 0.001249657 -0.000389035 0.000002830 -0.000005034 0.000015728 0.000056321 -0.000020281 0.000008167 -0.000002116 -0.000017427 0.000083439 -0.000019155 -0.000025842 0.000001789 0.000026876 -0.000338186 0.000075381 0.000002558 0.000003497 -0.000006244 0.000031224 -0.000007122 0.000004850 0.000001731 -0.000007555 0.000064162 -0.000013492 -0.000004807 -0.000003715 0.000002540 -0.000070522 0.000005690 0.000036928 0.000020041 0.000020937 0.000545927 -0.000086499 -0.000000846 -0.000018200 0.000006396 -0.000536083 0.000275710 -0.000032088 -0.000014664 -0.000008188 -0.000672470 0.000152214 0.000038097 0.000009108 0.000030769 -0.000020613 0.000173174 0.000016710 -0.000019461 0.000019282 -0.000531477 0.000358503 -0.000019278 -0.000002946 -0.000003502 -0.000391005 0.000056929 0.000084025 0.000125637 -0.000233701 0.000635436 -0.000120874 -0.000174264 -0.000327382 0.000214456 -0.001776204 0.000569722 -0.000092268 -0.000134514 0.000228547 -0.000552539 0.000157171 0.000123680 0.000227261 -0.000436557 0.000800340 -0.000159804 -0.000002948 0.000058360 -0.000257869 -0.000595748 0.000226995 -0.000184809 -0.000393835 0.000490376 -0.000625594 0.000175791 -0.000002310 0.000001185 0.000000226 -0.000019398 -0.000008962 0.000000363 -0.000000688 0.000001064 0.000000170 -0.000000780 -0.000000742 0.000001425 -0.000000763 0.000000156 -0.000002125 0.000005320 -0.000002835 0.000000139 0.000038133 0.000017232 0.000002127 -0.000002737 0.000002405 0.000011645 0.000002386 -0.000000976 0.000003947 -0.000002460 0.000006648 -0.000005929 0.000002077 -0.000000100 -0.000001648 0.000024407 0.000005175 -0.000000888 0.000000137 -0.000000048 -0.000014168 0.000002613 0.000001017 -0.000001240 -0.000000569 0.000004563 0.000005562 -0.000000996 0.000000572 0.000000049 -0.000005790 -0.000005594 -0.000000928 -0.000000563 0.000000681 -0.000017395 0.000001469 0.000000088 0.000000233 -0.000001347 0.000003556 0.000002708 -0.000000534 0.000000484 -0.000000478 -0.000002981 -0.000001304 0.000000830 0.000000190 -0.000000093 0.000014427 -0.000002617 -0.000000415 0.000001055 -0.000000015 0.000001299 -0.000004076 -0.000000997 0.000001035 0.000000079 -0.000008493 -0.000002447 0.000000187 0.000000642 -0.000000015 0.000007602 -0.000003411 0.000000433 0.000000092 -0.000000126 0.000006781 -0.000000689 -0.000002556 0.000001713 0.000000420 -0.000018002 -0.000010024 -0.000001233 0.000000368 -0.000000741 -0.000016373 0.000002817 -0.000000438 -0.000002564 0.000001948 -0.000019809 0.000004903 0.000000191 -0.000000610 0.000001186 -0.000003043 -0.000000799 -0.000000688 -0.000000707 0.000000540 -0.000015727 0.000003002 -0.000000520 -0.000000293 0.000000005 -0.000008614 0.000002469 0.000000482 -0.000001168 0.000000344 0.000001154 0.000003038 0.000001262 0.000000055 0.000000085 0.000018788 -0.000003027 -0.000000172 0.000001751 -0.000000935 0.000008781 -0.000004782 -0.000000260 -0.000000078 0.000000252 -0.000003633 -0.000000519 0.000000141 0.000000722 0.000000075 0.000007337 -0.000003992 0.000000817 -0.000000376 -0.000000220 0.000010046 0.000000215 -0.000002334 0.000002267 -0.000002944 -0.000028113 0.000004803 0.000006380 0.000003494 -0.000003760 0.000092205 -0.000002027 -0.000000853 0.000000997 -0.000001240 0.000000051 -0.000002269 0.000002397 -0.000000071 0.000000147 0.000042152 -0.000005262 -0.000003860 -0.000000977 -0.000000822 -0.000067258 0.000010010 0.000000112 0.000002168 -0.000003486 -0.000006337 0.000004261 0.000001762 -0.000001461 0.000001677 0.000024085 -0.000003285 -0.000003656 -0.000000963 0.000000893 -0.000055232 0.000003930 0.000000356 -0.000003238 0.000001076 -0.000015350 0.000009642 0.000000035 0.000000451 0.000000048 0.000001028 -0.000000936 -0.000001557 0.000001963 -0.000002670 -0.000033463 0.000008048 -0.000000680 -0.000001122 -0.000000582 -0.000026270 0.000009549 -0.000000501 -0.000000290 -0.000001080 -0.000017552 0.000007290 0.000001300 0.000000996 -0.000000884 0.000024234 -0.000002284 0.000000381 0.000001604 -0.000000396 0.000015877 -0.000006087 -0.000001089 0.000000003 -0.000000484 -0.000021837 0.000004006 -0.000001001 0.000000621 -0.000000562 -0.000013952 0.000000662 0.000000026 0.000001072 0.000000168 0.000008641 -0.000005006 -0.000002317 0.000003031 -0.000000733 -0.000023796 -0.000003265 0.000001966 -0.000002125 0.000001438 0.000023294 0.000000452 -0.000002630 0.000000720 -0.000001354 -0.000049602 0.000008777 -0.000000191 0.000002985 -0.000001801 0.000006591 -0.000004032 -0.000002945 -0.000000257 -0.000001050 -0.000051132 0.000007414 -0.000001098 0.000000490 -0.000001591 -0.000025866 0.000006941 0.000000660 -0.000000904 -0.000000231 0.000004734 0.000003047 0.000000048 -0.000001079 0.000000684 -0.000001286 0.000000614 0.000001488 0.000001336 0.000000133 0.000036713 -0.000008894 -0.000000293 -0.000000595 -0.000000287 -0.000012154 0.000004569 -0.000001509 0.000000816 -0.000000279 -0.000023515 0.000001207 0.000000633 0.000000712 0.000000324 0.000017827 -0.000005173 -0.000271445 -0.000123709 0.000152716 0.001992009 0.000212080 0.000155646 -0.000646744 0.000180599 0.001132482 -0.001136387 0.000025341 -0.000556368 -0.000000864 -0.000380220 0.000283861 -0.000022735 0.000789375 0.000086692 -0.001135360 0.000287605 0.000588734 -0.000170787 -0.000253479 -0.001442299 0.000481226 0.000298025 0.000130275 0.000140040 -0.000395679 0.000485733 -0.000017173 -0.000034685 0.000024551 -0.000137946 0.000338235 0.000039209 0.000054697 -0.000058907 -0.000398935 0.000057894 0.000044664 0.000101887 -0.000056864 -0.000033955 -0.000175533 -0.000011895 -0.000020730 -0.000005025 -0.001446724 0.000744270 0.000065135 0.000203135 0.000020367 -0.000473970 0.000558312 0.000056911 0.000159648 -0.000011881 -0.000521637 0.000193767 -0.000062597 -0.000071795 -0.000026466 -0.000875123 0.003232779 -0.000011789 0.000067766 -0.000080467 -0.003595529 0.001153886 -0.000227318 -0.000236031 0.000175139 0.003282979 -0.003064443 0.000032076 0.000018564 -0.000013372 0.001294087 -0.000056675 0.000079841 0.000152272 -0.000056089 -0.000426581 0.000289885 0.000084099 0.000162553 -0.000097310 -0.000721947 -0.000663055 -0.000033403 -0.000026440 -0.000011408 0.000580084 -0.000542666 0.000035313 -0.000025281 0.000016340 0.000370164 0.000637547 0.000051454 0.000019363 -0.000022903 -0.000745639 -0.001615563 -0.000071699 -0.000070322 0.000072405 0.000216440 0.000344401 -0.000001412 -0.000284170 -0.000009772 -0.000021468 0.000215300 0.000216469 0.000262000 -0.000075585 -0.001348668 0.000778914 0.673540395 0.120789553 0.757997978 -0.037342665 0.138287824 0.178834538 -0.200236305 -0.068586442 0.158395568 0.614727418 -0.009517737 -0.244338027 -0.101491075 -0.092572488 0.266964759 0.000618262 -0.120701376 -0.085554172 -0.062943030 0.105466034 0.013855514 -0.094026135 -0.061766050 -0.104695244 0.099146590 0.043994780 -0.106907221 -0.010719819 -0.009568696 0.003887101 -0.014361178 -0.019302014 -0.059866316 -0.014992389 0.000755217 -0.031349740 -0.008860047 -0.039056806 -0.241811298 0.000563644 0.001020355 -0.002886515 -0.000488160 0.001443149 0.000158240 0.000333515 -0.000384026 -0.000840299 0.000013719 0.000048833 0.000131667 0.000853770 -0.000324135 0.000237836 0.000039099 -0.005874884 0.003918183 -0.002400001 0.014084810 0.000846960 -0.001807844 0.002429094 0.002743124 -0.002141517 0.000666706 -0.002577438 0.032387257 0.003687459 -0.027585197 0.001736468 0.001777374 0.010254170 0.002572382 -0.014537116 0.000371324 0.000584354 0.000512317 0.002353986 -0.006979073 -0.000376506 0.001532669 -0.026998062 -0.007946667 -0.030764433 0.001330408 0.001347245 -0.005394053 -0.001636317 -0.005445208 0.000208687 0.000427242 -0.001504305 0.005199183 -0.001133138 -0.000028623 0.000319429 -0.003648668 -0.002305085 0.007487676 0.000069804 0.000622780 -0.004731106 -0.002037725 0.004248654 -0.000166020 0.001202745 -0.001491666 0.004767986 0.000160050 0.000245163 -0.002571738 0.003954688 -0.001096599 0.004397374 -0.000286664 0.000474986 0.000155570 0.000256163 -0.002363442 0.000003255 -0.000598182 0.000388457 -0.002373611 0.000651349 -0.000303423 0.000105837 0.001666533 0.000910433 0.000871365 0.000110789 0.001171134 -0.001436407 0.001123423 0.002175560 0.000066601 -0.000359571 -0.000162026 -0.002328345 0.000667294 0.000133547 -0.002369556 0.000557768 0.000688676 -0.000283509 0.000015007 0.000049150 0.000374561 -0.000021025 0.000077490 0.000003899 -0.000083566 -0.000208940 0.000231331 0.000086507 0.000026643 0.000044929 -0.001317007 -0.000672373 -0.000007832 0.000031720 0.000018142 0.000058374 0.000053740 -0.000363405 0.000000027 -0.000009643 -0.000062441 0.000482973 -0.000074849 -0.000014444 -0.000534337 0.001594406 -0.000128997 0.000074146 -0.000033529 0.000072281 -0.000010837 0.000209891 0.000028888 0.000006846 -0.000084440 0.000020135 -0.000764468 0.000177256 -0.000053713 -0.000079445 0.000070859 -0.000111009 0.000053862 -0.000009964 0.001173111 0.006690311 -0.005999433 -0.003619002 -0.000500285 0.001805364 0.004526039 -0.003027567 -0.000681725 0.000159840 -0.000046282 0.003950066 0.000387851 0.002404048 0.000862260 -0.001898901 -0.004745312 0.003383673 0.001656803 0.000209575 -0.001457914 -0.003946163 0.003395282 0.001744136 0.000320304 0.000269802 0.001997887 -0.001350440 -0.000276840 0.000000964 0.000033988 0.000203721 -0.000212947 0.000002219 -0.000008515 -0.000163342 -0.000212816 0.000113722 0.000088373 -0.000003101 -0.000108205 -0.000139490 0.000111017 0.000027587 -0.000002041 0.000872368 0.002951309 -0.021516246 0.013093752 -0.000079020 -0.008658426 -0.057474371 0.052136670 -0.035842208 0.005340040 -0.006546757 -0.015937828 0.010992603 -0.009701467 0.000459479 0.003150137 0.008980436 -0.009019280 0.001992766 -0.000347077 0.009650066 0.032125724 -0.038247785 0.007478675 -0.001200461 0.011236640 0.049515499 -0.051341740 0.019095651 -0.002547408 -0.007327594 -0.031329223 0.029359900 -0.009111670 0.001537061 -0.004326386 -0.020054766 0.016625796 -0.003801810 0.000923894 -0.001277730 -0.008388403 0.007915185 -0.004513867 0.000431687 0.004782738 0.018775847 -0.017043355 0.003017237 -0.000889088 0.001847211 0.005727360 -0.006281854 0.001861161 -0.000240673 -0.001077097 -0.002655871 0.001857869 0.000233655 0.000084760 -0.000710755 -0.002680803 0.002437592 -0.000341772 0.000124309 -0.000313360 -0.001017458 0.001062918 -0.000300782 0.000043241 0.000320618 0.000676150 -0.000521344 -0.000052105 -0.000016461 -0.000882561 -0.002316710 0.002522336 -0.000381060 0.000087636 -0.000158770 -0.000092910 0.000211135 -0.000183484 -0.000015495 0.000060609 -0.000071755 -0.000131799 0.000343249 0.000037258 -0.000683417 -0.002607956 0.002335761 -0.000260959 0.000122285 -0.000256331 -0.000748854 0.000810162 -0.000276136 0.000024915 0.000054557 -0.000035229 0.000119720 -0.000115529 0.000008360 0.003492406 0.013803249 -0.014953226 0.005683111 -0.000883132 -0.002511439 -0.003461997 0.002755887 0.002725529 -0.000012432 -0.003785196 -0.018848763 0.021508589 -0.009407841 0.001020204 -0.000231931 -0.000078809 -0.000449709 0.000134026 0.000008952 0.000984094 0.003497689 -0.003234545 0.000573466 -0.000141542 0.001532384 0.006673320 -0.007364998 0.001819276 -0.000264163 0.000233560 0.000619286 -0.000546712 -0.000070933 -0.000019768 -0.000166923 -0.000455381 0.000309541 0.000053960 0.000016275 -0.000101323 -0.000213274 0.000241121 -0.000025216 0.000004464 -0.000026287 -0.000104226 0.000100334 -0.000005922 0.000004827 -0.000110781 -0.000380229 0.000375377 -0.000052878 0.000016659 0.000124981 0.000550947 -0.000509759 0.000164011 -0.000028433 0.000004179 0.000016307 -0.000025572 0.000033432 -0.000000959 0.000180705 0.000649158 -0.000589634 0.000035674 -0.000028365 -0.000122458 -0.000515230 0.000450447 -0.000084458 0.000025487 0.000185549 0.000183140 -0.000111993 -0.000165303 -0.000001556 0.000051654 -0.000069495 0.000112085 -0.000148130 0.000013466 0.000156071 -0.000047987 0.000172823 -0.000295930 0.000008705 -0.000075900 -0.000337928 0.000348051 -0.000131963 0.000017278 0.000122789 0.000773833 -0.000679011 0.000118738 -0.000057181 -0.000081301 -0.000068942 0.000222474 -0.000195762 -0.000013735 -0.000085687 -0.000455652 0.000048300 0.000423267 0.000041470 -0.000436252 -0.000575348 0.000655564 0.000268185 0.000036422 -0.000174017 0.000042347 -0.000053582 0.000128372 -0.000033237 0.000093486 0.000272635 -0.000240465 -0.000006341 -0.000010309 0.000068441 0.000116142 -0.000086607 -0.000028399 -0.000002323 0.000099676 0.000172931 -0.000123948 -0.000050196 -0.000003830 -0.000042772 -0.000116104 0.000108712 -0.000009452 0.000003759 -0.000144528 -0.000511424 0.000462432 -0.000046545 0.000022367 -0.000121596 -0.000492672 0.000456570 -0.000098771 0.000022475 0.000035499 0.000100911 -0.000099980 0.000021064 -0.000003707 0.000138113 0.000516898 -0.000452473 0.000029271 -0.000023410 0.000068525 0.000321007 -0.000268770 0.000012894 -0.000017755 0.000001002 -0.000190054 0.000327778 -0.000053938 -0.000000519 0.000022329 -0.000730640 0.000970522 -0.000835578 0.000047979 -0.000210094 -0.001193027 0.001326432 -0.000858208 0.000064469 0.000037595 0.000340418 -0.000355321 0.000179309 -0.000016538 -0.000022177 -0.000259808 0.000314723 -0.000143563 0.000016610 -0.000176097 -0.000718487 0.000798213 -0.000227787 0.000037196 -0.000000029 -0.000163672 0.000278819 -0.000134076 0.000004924 -0.000219127 -0.000590415 0.000635687 0.000011099 0.000022073 -0.000211643 -0.001028902 0.001109072 -0.000347754 0.000044199 -0.000011154 -0.000038678 0.000008543 0.000051996 0.000003026 -0.000024378 -0.000174536 0.000153141 0.000035116 0.000010581 -0.000093227 -0.000080907 0.000040236 0.000066825 -0.000001081 0.000012320 0.000151211 -0.000131066 -0.000015829 -0.000008119 -0.000044721 0.000135053 -0.000173110 0.000065652 -0.000009840 -0.000074367 -0.000184138 0.000164285 -0.000005573 0.000002587 -0.000030467 -0.000151795 0.000138965 0.000019952 0.000004913 -0.000145338 -0.000314390 0.000222566 0.000163568 0.000012013 0.000015574 0.000186047 -0.000186959 0.000040289 -0.000008418 -0.000041291 0.000011392 -0.000043291 0.000043737 -0.000001198 -0.000138430 -0.000093719 -0.000013015 0.000191551 0.000001286 0.000101564 -0.000134228 0.000246796 -0.000193336 0.000014368 0.000013184 0.000002851 0.000020835 -0.000040266 -0.000000289 0.000189611 0.000236122 -0.000109820 -0.000208746 -0.000003660 0.000042913 0.000040538 -0.000020916 -0.000035269 0.000000982 -0.000067866 -0.000108940 0.000084997 0.000038343 0.000002146 0.000030645 0.000118983 -0.000121338 0.000002530 -0.000004882 0.000147345 0.000153024 -0.000038968 -0.000193222 -0.000002462 -0.000101876 -0.000196428 0.000111596 0.000111170 0.000005904 -0.000039519 -0.000097765 0.000080907 0.000019709 0.000001666 -0.000072037 -0.000084586 0.000033545 0.000056033 -0.000000281 -0.000022577 -0.000198926 0.000163516 0.000050529 0.000015253 0.000016188 -0.000003767 0.000019751 -0.000027470 -0.000007666 -0.000180344 -0.000270481 0.000150370 0.000181820 0.000007359 0.000766322 0.000290996 0.000387530 -0.001227921 0.000020082 0.000326542 -0.001454251 0.001667951 -0.000826894 0.000069299 -0.000615978 -0.001083898 0.000353122 0.001023391 0.000025357 0.000045431 0.000068909 -0.000048523 -0.000032501 -0.000001108 0.000023751 -0.000006692 0.000033885 -0.000056065 0.000000942 0.000005913 0.000036747 -0.000048525 0.000026906 -0.000001108 0.000021062 0.000067067 -0.000067924 0.000011052 -0.000002114 -0.000002779 0.000025803 -0.000027909 0.000009357 -0.000001325 0.000005145 0.000014630 -0.000013844 -0.000003421 -0.000000684 0.000010001 -0.000112831 0.000110397 -0.000005910 0.000001188 0.000004166 -0.000109080 0.000118705 -0.000022688 0.000007806 0.000034037 0.000079378 -0.000083201 -0.000002946 -0.000000459 0.000137376 0.000299042 -0.000252054 -0.000059642 0.000000363 -0.000041686 0.000022812 -0.000041347 0.000015912 -0.000004668 -0.000071061 -0.000090629 0.000065356 0.000033074 -0.000006438 0.000291688 0.000391759 -0.000304933 -0.000096426 -0.000004117 -0.000089008 -0.000272675 0.000245117 0.000023239 0.000005365 0.000018329 -0.000034881 0.000041699 -0.000012356 0.000003227 -0.000188379 -0.000354652 0.000284627 0.000076883 0.000001438 -0.000076307 -0.000079843 0.000050640 0.000005198 -0.000001920 -0.000057022 -0.000065490 0.000021990 0.000015606 -0.000000463 -0.000070194 -0.000114080 0.000070012 0.000028120 -0.000000636 0.000284395 0.000448447 -0.000333851 -0.000110113 -0.000001286 0.000067655 0.000123971 -0.000109478 -0.000020220 -0.000001729 0.000017302 0.000059536 -0.000054114 -0.000010695 -0.000000945 0.000101350 0.000217365 -0.000193557 -0.000020928 -0.000004951 -0.000020940 -0.000079331 0.000088040 -0.000014871 0.000004018 -0.000060017 -0.000134403 0.000130981 0.000014915 0.000010182 -0.000032160 -0.000038702 0.000018128 0.000026447 0.000000330 -0.000092701 -0.000228828 0.000227206 0.000008468 0.000005183 0.000335365 0.001085679 -0.000736493 0.000012668 0.000008786 -0.001587227 -0.002585595 0.002091135 0.000445504 -0.000008221 -0.000613335 -0.001476414 0.001288181 0.000001479 0.000005226 -0.000069465 -0.000083958 0.000062572 0.000024607 0.000000162 -0.000072746 -0.000097024 0.000066942 0.000023757 -0.000000590 0.000255290 0.000368176 -0.000238486 -0.000092210 0.000001238 -0.000014232 -0.000031414 0.000026070 0.000001068 0.000000424 -0.000042396 -0.000058366 0.000034305 0.000016981 -0.000000803 0.000025513 0.000066814 -0.000045578 -0.000019835 -0.000001222 -0.000437184 -0.000604116 0.000150104 0.000662437 0.000006778 0.000018004 0.000730516 -0.000726444 0.000146624 -0.000027195 0.000304795 0.000784190 -0.000418270 -0.000451902 -0.000019362 -0.000502558 0.000247737 -0.000607216 0.000863227 -0.000032911 -0.000168690 0.000849468 -0.000942351 0.000418902 -0.000036083 0.000137370 0.000463757 -0.000222293 -0.000258224 -0.000018874 -0.000347026 -0.000696816 0.000468399 0.000092010 -0.000005816 0.001240835 0.002178066 -0.001744177 -0.000330954 0.000009443 0.000248503 0.000651897 -0.000599906 0.000024591 0.000003211 -0.000327417 -0.000888685 0.000626207 0.000043263 -0.000019383 0.000512101 0.000751356 -0.000651267 -0.000172998 0.000006753 0.000234937 0.000751102 -0.000683357 0.000105799 -0.000009681 0.000006302 0.000015624 0.000002453 -0.000021478 -0.000001020 -0.000009807 0.000003412 -0.000007782 0.000008636 -0.000001062 0.000007528 -0.000003139 0.000010566 -0.000009435 0.000000698 -0.000024499 -0.000023788 -0.000018028 0.000052789 -0.000000085 -0.000026282 -0.000001319 -0.000020618 0.000029090 -0.000001718 0.000017463 -0.000015657 0.000032520 -0.000023203 0.000001944 0.000001944 -0.000024516 0.000013469 0.000010310 0.000001714 0.000007684 0.000013996 -0.000009181 -0.000004982 0.000000100 0.000003036 -0.000003011 -0.000003611 0.000007014 0.000000485 0.000000672 0.000002790 0.000004624 -0.000009929 -0.000000208 0.000002821 0.000018831 -0.000014647 -0.000003182 -0.000000705 0.000012175 -0.000005830 0.000008344 -0.000005521 0.000001179 0.000005758 0.000000899 0.000004041 -0.000007198 0.000000348 -0.000007091 -0.000014868 0.000010179 0.000004712 0.000000117 -0.000000853 -0.000003100 0.000007418 -0.000005209 -0.000000016 0.000003703 0.000006602 0.000001065 -0.000008478 -0.000000041 -0.000004724 -0.000008683 0.000008383 -0.000000099 -0.000000020 -0.000002519 -0.000007091 0.000004820 0.000002173 0.000000195 0.000006869 0.000012087 0.000008039 -0.000024310 -0.000000352 0.000016617 0.000014280 -0.000004788 -0.000011534 0.000000637 -0.000006764 0.000025796 -0.000030880 0.000010455 -0.000001922 -0.000011778 0.000006846 -0.000010978 0.000007934 -0.000001398 0.000003183 0.000018094 -0.000015827 -0.000000102 -0.000000789 0.000007522 0.000007833 -0.000005099 -0.000003566 0.000000462 -0.000002266 0.000001265 -0.000006901 0.000007007 -0.000000255 -0.000012998 -0.000018202 0.000010221 0.000008348 -0.000000104 0.000004074 -0.000013297 0.000019528 -0.000009954 0.000000974 -0.000000650 0.000003627 -0.000002589 -0.000000908 -0.000000178 -0.000005794 -0.000008625 0.000008601 -0.000000524 -0.000000002 -0.000003610 -0.000009423 0.000004529 0.000005091 0.000000047 0.000035999 0.000023411 -0.000001128 -0.000025089 0.000001238 -0.000020865 -0.000092468 0.000062481 0.000027079 0.000003749 0.000011045 -0.000005569 0.000012788 -0.000011932 0.000001102 -0.000017932 -0.000043314 0.000028687 0.000011765 0.000000455 0.000035834 0.000070926 -0.000049471 -0.000019532 -0.000001050 0.000016725 0.000007183 -0.000000832 -0.000007593 0.000000850 -0.000025149 -0.000021121 0.000005339 0.000018408 -0.000000988 0.000019716 0.000055689 -0.000035910 -0.000017414 -0.000001663 -0.000004391 0.000023396 -0.000034748 0.000017959 -0.000001894 -0.000001560 -0.000001090 0.000001689 0.000000551 0.000000066 0.000030726 0.000034827 -0.000018383 -0.000014663 0.000000549 0.000012602 0.000030726 -0.000029880 0.000002841 -0.000000488 0.000013268 0.000019830 -0.000017445 -0.000000815 -0.000000059 -0.000004250 -0.000026420 0.000021010 0.000003360 0.000001188 -0.000003652 -0.000019163 0.000021846 -0.000004767 0.000000573 0.000012379 0.000022796 -0.000015406 -0.000006563 -0.000000321 0.000010106 0.000012762 -0.000004168 -0.000009238 -0.000000060 -0.000004051 -0.000011065 0.000013989 -0.000004004 0.000000151 0.000020280 0.000018024 0.000005261 -0.000025730 0.000001090 -0.000023202 -0.000018631 -0.000000125 0.000023003 -0.000001170 0.000031720 0.000050920 -0.000032112 -0.000017092 0.000000158 0.000009309 -0.000010633 0.000020893 -0.000013515 0.000001113 0.000029426 0.000052018 -0.000033222 -0.000017539 -0.000000834 0.000021135 0.000027781 -0.000018651 -0.000008539 0.000000172 -0.000001311 -0.000002746 -0.000003935 0.000006960 0.000000061 -0.000004290 0.000002408 -0.000006161 0.000004510 -0.000000400 -0.000016004 -0.000041034 0.000035458 0.000002336 0.000000714 0.000006563 0.000014185 -0.000013858 0.000001032 -0.000000080 0.000012900 0.000023133 -0.000010723 -0.000011752 -0.000000215 -0.000008802 -0.000020141 0.000017971 0.000000943 0.000000356 -0.000983958 -0.009532383 0.004542834 -0.004383761 0.000662359 -0.000992847 0.006702817 -0.000970452 0.004745534 0.002526757 -0.000175384 -0.003535060 0.000276555 -0.002393090 -0.000072077 0.000359933 0.001332161 -0.002350299 -0.000012328 0.000137588 0.000683598 0.001762183 -0.001250202 0.000610492 -0.000118659 0.000507887 0.000798212 -0.001757523 0.000168097 -0.000884669 0.000268464 0.000306986 -0.001667212 0.000439228 -0.000491596 0.000213630 0.000653831 -0.000240513 -0.000471460 0.000508335 -0.000319904 -0.000493096 0.000733489 0.000283890 0.000372704 0.000775095 0.000487600 -0.002929498 -0.001021485 -0.000119926 0.000598563 -0.000181752 -0.000882246 -0.000571791 -0.000319766 0.000178656 0.000049342 -0.000709941 0.000306278 0.000069167 0.000276975 0.001215675 -0.001394334 -0.001607124 -0.000066063 0.000197977 0.000524363 -0.008472033 0.010812336 -0.000148239 0.000023591 -0.000984453 0.006127254 -0.004550869 -0.000178379 -0.000632624 -0.001925749 0.001507643 0.001230161 0.000041956 -0.000098021 0.000110260 0.000716131 -0.000470710 -0.000018785 0.000773635 0.002102069 -0.000906700 -0.001877251 -0.000035419 -0.000743474 -0.000810757 0.001183363 0.000064233 -0.000101021 0.000350249 -0.001625999 0.000313046 0.000317978 0.000066220 0.000372028 0.001881566 -0.000494799 -0.000146965 -0.000089199 -0.000286670 -0.000221710 0.000487498 -0.000286204 0.000062864 -0.000184360 -0.000085730 0.000236512 0.000058210 -0.000068509 0.000281756 0.001435370 -0.001685382 0.000011284 -0.000012287 0.091082549 0.058632609 0.109408165 -0.001062742 -0.023104165 0.694326860 0.002033172 -0.012057307 0.101009703 0.196889894 0.002836951 -0.008969687 -0.010300714 0.043510338 0.672774698 0.000380177 0.000118596 -0.072800998 -0.014475299 -0.001566669 0.000202978 -0.000117604 -0.013854029 -0.011647803 0.000917907 0.000187027 0.000014680 -0.000812924 0.000181564 0.000797362 0.000649068 -0.002284988 -0.284444401 -0.037889138 0.116889063 -0.000559846 0.000055541 -0.043102548 -0.076110774 0.020060908 0.000847472 0.000582294 0.054234914 0.005020731 -0.172669697 -0.000514179 0.002704395 -0.275769806 -0.049901341 -0.109392576 0.001778736 -0.000600562 -0.044029699 -0.080508637 -0.029810333 -0.001011670 -0.004257308 -0.051659217 -0.016441880 -0.173684505 -0.000505072 -0.001409789 0.039615248 0.005866470 -0.024188846 -0.000035899 0.000146921 0.000593508 0.008427040 -0.007401729 0.000732834 -0.000246549 -0.077242500 -0.020194785 -0.030123207 0.000027638 0.000237655 0.034336690 0.006648901 0.025745252 0.000178342 0.000081986 0.012178020 0.011706297 0.003199185 -0.000121020 -0.000047049 0.078811760 0.015077231 -0.026358468 0.000279268 0.001283216 -0.016262031 -0.005194589 -0.015274386 0.000028467 0.000065533 -0.003588615 0.002406563 -0.003755481 -0.000360507 -0.000455769 0.013585347 0.003370522 0.010238611 -0.000016381 -0.000006747 -0.015540731 -0.002333452 0.013088654 -0.000192035 -0.000054967 -0.005030883 0.002671229 0.003131883 -0.000113515 0.000237894 -0.013302814 -0.001864018 0.012942350 0.000060301 0.000059500 0.001501188 -0.000898707 0.001195359 -0.000204551 0.000069400 -0.001234062 0.007241420 -0.000888791 0.000035834 -0.000402819 0.001317143 -0.000406064 -0.005123940 -0.000022340 0.000012489 0.001849370 -0.001233490 -0.000297561 -0.000034090 0.000005205 -0.001297135 0.007073007 -0.001061826 0.000047644 -0.000032349 -0.001138915 -0.000887618 -0.005171258 0.000026030 0.000077192 -0.001286572 -0.000136178 -0.000081800 -0.000027031 0.000014234 -0.000095885 -0.000745368 0.000005654 0.000029762 -0.000004765 0.000004074 0.000177876 0.000856468 0.000728834 -0.000179188 -0.000016189 0.000557889 0.000136395 0.000050160 -0.000200734 -0.000187572 0.000747363 0.000234565 0.000019141 -0.000658290 -0.000016298 -0.000055911 0.000029791 -0.000429060 0.000125549 0.000165150 -0.000395433 -0.000268154 -0.000374646 0.000059491 0.000183454 -0.000478607 -0.000259354 0.000128683 -0.000095278 -0.000071659 0.000199808 0.000131086 0.000014191 -0.000009081 -0.000006010 0.000042699 0.000029637 -0.000017879 0.000013719 0.000004921 -0.000015843 -0.000008641 -0.000018288 0.000015280 0.000000686 -0.000016642 -0.000005305 0.001128906 -0.001119426 0.000033209 0.001443687 -0.005414092 -0.022587806 0.009877822 0.000217155 -0.005335183 0.011541414 -0.003076557 0.002520028 -0.001543994 0.002549374 -0.005033152 0.000886740 -0.001269149 0.000676174 0.004359567 -0.003050447 0.005620972 -0.002457638 0.002124714 -0.003323454 0.006449106 0.010483897 -0.005549495 -0.001936815 0.008585405 -0.003390071 -0.005396190 0.003135922 -0.000154353 -0.002556045 -0.000633934 -0.003439360 0.001765399 0.000454987 -0.001567655 -0.003256604 -0.001570587 0.000904746 0.000059207 -0.000441845 0.000468857 0.003113150 -0.001635521 -0.000239400 0.001872702 0.001512817 0.001202702 -0.000605320 -0.000342080 0.000530744 -0.000108286 -0.000430153 0.000178746 0.000318832 -0.000075360 0.000229148 -0.000412969 0.000223319 0.000023624 -0.000312062 -0.000324640 -0.000188817 0.000102251 0.000021972 -0.000119862 -0.000026944 0.000108668 -0.000054409 -0.000028518 0.000032487 -0.000004404 -0.000417499 0.000198058 0.000289679 -0.000216478 0.000079883 -0.000056879 0.000026052 -0.000046105 -0.000013974 0.000430655 0.000032765 -0.000039989 -0.000038037 0.000001261 0.000076195 -0.000396487 0.000209392 0.000024355 -0.000248260 -0.000207593 -0.000150078 0.000083706 0.000039107 -0.000043258 0.000067705 -0.000013740 0.000006984 0.000010399 -0.000025179 0.000002110 0.003320187 -0.001528666 0.000023100 0.001670147 0.002070472 -0.000392059 0.000246583 -0.000776753 -0.002354079 -0.003471504 -0.003822244 0.002170949 -0.000204026 -0.000613678 -0.000597663 -0.000051213 -0.000041793 0.000005725 0.000264333 0.000023789 0.000606688 -0.000351776 0.000382064 0.000551973 0.000251330 0.001065151 -0.000751520 0.000566287 0.001129529 0.000746667 0.000063751 -0.000035951 -0.000016295 0.000097296 0.000062525 -0.000059595 0.000026824 0.000009343 -0.000024944 -0.000009875 -0.000027476 0.000018350 0.000004967 -0.000039360 -0.000006559 -0.000012836 0.000007256 0.000001982 -0.000020063 -0.000004414 -0.000057810 0.000032199 0.000004050 -0.000049596 -0.000039479 0.000111154 -0.000057137 -0.000000338 0.000045579 0.000040041 0.000008616 -0.000005369 0.000001290 0.000000855 -0.000008060 0.000086487 -0.000049323 -0.000008515 0.000100928 0.000064279 -0.000086018 0.000047345 0.000000710 -0.000057830 -0.000057068 0.000027575 0.000013373 -0.000157403 0.000008165 -0.000224225 -0.000023261 0.000018982 0.000088453 -0.000016686 -0.000114917 -0.000019742 0.000034523 0.000046319 0.000010089 -0.000264382 -0.000068876 0.000037781 0.000015857 -0.000038355 -0.000003475 0.000124567 -0.000058368 -0.000028428 0.000065681 0.000076611 -0.000035643 0.000040072 -0.000040439 0.000011206 -0.000138375 -0.000007269 -0.000016265 -0.000021138 -0.000046598 -0.000008132 -0.000058753 -0.000003333 0.000057086 -0.000085594 -0.000086083 0.000018029 -0.000015233 -0.000048141 -0.000032426 0.000097542 0.000037702 -0.000020898 0.000007562 0.000022478 0.000028019 0.000018368 -0.000004155 -0.000045211 -0.000004530 -0.000029917 0.000026072 -0.000008376 -0.000044469 0.000011892 -0.000025940 -0.000017460 0.000010513 -0.000001928 -0.000013192 -0.000003130 -0.000078256 0.000040158 0.000018832 -0.000046782 -0.000033181 -0.000082303 0.000044187 0.000002702 -0.000042299 -0.000030082 0.000017494 -0.000009447 0.000000442 0.000010784 0.000000343 0.000073175 -0.000041567 0.000019304 0.000062092 0.000057268 0.000045006 -0.000021155 -0.000013984 0.000034574 0.000031598 -0.000005201 0.000030132 0.000102773 -0.000288241 -0.000120073 -0.000169788 0.000112653 0.000064224 -0.000203498 0.000105180 -0.000231715 0.000137205 -0.000379790 -0.000214630 -0.000012090 0.000064673 -0.000034020 -0.000097262 0.000007030 -0.000039324 -0.000048829 0.000023983 0.000100349 -0.000004606 -0.000028272 -0.000132697 0.000077325 -0.000053957 -0.000075928 -0.000109893 -0.000026839 0.000034265 0.000030374 -0.000146702 -0.000040707 -0.000067940 0.000054652 -0.000072691 -0.000016284 -0.000028929 -0.000165460 0.000116603 0.000049193 -0.000125923 -0.000222734 0.000002138 -0.000003939 0.000002265 -0.000001616 -0.000011510 -0.000013871 0.000004595 0.000006577 -0.000022923 -0.000031368 -0.000010687 0.000001351 0.000005984 0.000000534 0.000021771 0.000014858 -0.000007442 -0.000004822 0.000021034 0.000030055 0.000017819 -0.000011480 0.000001826 0.000032152 0.000041282 -0.000020388 0.000013786 -0.000001402 -0.000021766 0.000008062 -0.000017540 0.000006458 0.000016487 -0.000019083 -0.000019836 -0.000025831 0.000000279 0.000024382 -0.000029238 -0.000029927 0.000021363 -0.000015863 0.000001068 0.000027379 0.000037012 0.000001679 0.000001548 0.000017564 -0.000000973 -0.000039548 0.000000769 -0.000012165 0.000053190 0.000023454 0.000007662 -0.000030293 0.000028370 -0.000009537 -0.000046426 -0.000010663 -0.000003893 0.000003755 0.000000314 -0.000000811 -0.000001625 0.000013682 0.000006294 -0.000014171 0.000006102 -0.000027216 0.000002763 0.000001264 -0.000011316 -0.000000727 -0.000015272 -0.000012179 0.000003778 0.000007965 -0.000006808 0.000008231 0.000015573 -0.000006770 -0.000010154 0.000015753 0.000011032 0.000004835 0.000009006 -0.000010474 -0.000001180 -0.000011400 -0.000013413 0.000003031 0.000008520 -0.000014425 -0.000010271 -0.000008336 0.000003534 0.000002921 -0.000011621 -0.000004435 -0.000005815 0.000002766 0.000002702 -0.000003520 0.000003384 -0.000019793 0.000005508 0.000014554 -0.000024309 -0.000067814 0.000000103 0.000001203 -0.000013083 -0.000006008 0.000031810 -0.000017184 0.000000001 0.000009583 -0.000011183 0.000009066 -0.000060570 0.000125503 -0.000092052 -0.000042314 -0.000207993 -0.000217615 0.000161528 0.000114666 -0.000501317 -0.001147691 -0.000032948 -0.000047878 0.000207961 -0.000180945 -0.000740026 0.000007245 -0.000000993 -0.000007850 0.000003578 -0.000004299 -0.000005410 0.000006802 -0.000005231 -0.000006084 -0.000002803 0.000007817 -0.000005118 -0.000003028 0.000004983 -0.000006351 0.000010304 -0.000005962 -0.000002011 0.000008881 0.000002925 0.000003238 -0.000002584 0.000000317 0.000005030 0.000007847 0.000001264 0.000000098 -0.000002041 0.000001171 -0.000002321 0.000006369 -0.000004067 0.000007518 -0.000023550 -0.000019178 -0.000020035 0.000008709 0.000001681 -0.000016967 -0.000005596 0.000002470 -0.000003044 -0.000002025 0.000014558 0.000013945 0.000015608 -0.000016092 -0.000009255 0.000049664 0.000027497 -0.000003565 0.000005251 -0.000002757 0.000011986 0.000009882 -0.000010007 0.000011192 -0.000001311 -0.000008251 -0.000001277 0.000053855 -0.000041442 -0.000002556 0.000049680 0.000022410 -0.000007587 0.000005985 0.000010006 -0.000046387 -0.000035494 -0.000003218 -0.000000939 0.000001729 -0.000010091 -0.000002370 -0.000039752 0.000030839 0.000004328 -0.000047779 -0.000024233 -0.000001361 -0.000000117 0.000003304 -0.000004487 -0.000006590 0.000002250 -0.000003312 0.000004299 -0.000000387 -0.000005516 -0.000003308 0.000002653 0.000003702 -0.000010435 -0.000009552 0.000045039 -0.000034082 -0.000006892 0.000054634 0.000030304 0.000015063 -0.000011082 -0.000001230 0.000017895 0.000010367 0.000002180 -0.000002586 -0.000001366 0.000011773 0.000007762 0.000025165 -0.000016577 -0.000004194 0.000034060 0.000016723 -0.000012267 0.000006627 0.000001778 -0.000014639 -0.000005211 -0.000021727 0.000011555 0.000002319 -0.000030419 -0.000018829 -0.000013571 0.000008924 -0.000002875 -0.000002845 0.000002634 -0.000018836 0.000014202 0.000006048 -0.000043050 -0.000021661 -0.000081539 0.000078659 -0.000086627 0.000085498 0.000104487 -0.000210944 0.000171560 0.000049730 -0.000323638 -0.000172509 -0.000034527 0.000019533 0.000066022 -0.000184217 -0.000121929 -0.000009821 0.000008032 -0.000000472 -0.000010177 -0.000005680 -0.000007185 0.000005822 0.000001806 -0.000009773 -0.000006608 0.000026112 -0.000018404 -0.000009604 0.000034555 0.000023380 -0.000001672 0.000000850 0.000001591 -0.000004058 -0.000002379 -0.000003673 0.000002769 0.000002185 -0.000004109 -0.000002703 0.000003569 -0.000002019 -0.000002279 0.000007380 0.000006773 -0.000013769 -0.000047258 0.000168284 -0.000038992 -0.000329520 0.000092765 -0.000053764 -0.000050310 0.000188257 0.000344094 0.000045380 0.000004245 -0.000016179 0.000184027 0.000480197 0.000090208 -0.000111127 0.000042017 0.000226919 0.000566883 0.000116919 -0.000080226 0.000012823 0.000286500 0.000615347 0.000026049 -0.000001916 -0.000130976 0.000135980 0.000440266 -0.000003332 -0.000002596 0.000035218 -0.000062736 -0.000054534 0.000143588 -0.000117840 -0.000055066 0.000259250 0.000148617 0.000007707 -0.000010134 -0.000031550 0.000086904 0.000052632 0.000043413 -0.000037668 0.000059710 -0.000077926 -0.000077859 0.000085625 -0.000082262 -0.000002030 0.000107068 0.000049482 -0.000024386 0.000034736 -0.000047725 0.000094541 0.000074177 -0.000000750 0.000000459 -0.000000165 0.000000654 0.000006853 0.000000400 -0.000000695 0.000000131 0.000001392 0.000004002 -0.000000642 0.000000372 0.000000544 -0.000002256 -0.000001534 0.000002857 -0.000002389 0.000000473 0.000002172 -0.000004412 0.000000723 -0.000000724 0.000000533 0.000004014 0.000005589 -0.000002090 0.000001107 0.000000419 -0.000005431 -0.000004625 -0.000000029 0.000000364 0.000000080 -0.000003415 -0.000010345 0.000001109 -0.000000637 0.000000055 0.000001553 0.000001664 0.000001052 -0.000000387 -0.000000421 -0.000000305 -0.000005058 -0.000001004 0.000000877 0.000000040 -0.000000215 0.000001730 0.000001164 -0.000000738 -0.000000230 0.000002508 0.000004008 0.000000207 0.000000173 -0.000000096 -0.000002329 -0.000005920 -0.000000253 0.000000348 0.000000071 -0.000000654 -0.000000765 -0.000001135 0.000000658 0.000000091 -0.000001480 -0.000001667 -0.000000986 0.000000446 0.000000249 -0.000000731 0.000001471 -0.000000253 0.000000032 0.000000055 0.000000225 0.000002514 -0.000001054 0.000000568 0.000000169 -0.000000969 0.000000311 -0.000000507 0.000000332 0.000000042 -0.000000818 -0.000001477 -0.000001699 0.000001106 -0.000000038 -0.000000442 0.000005021 0.000001135 -0.000000501 -0.000000208 0.000000286 -0.000001737 0.000002535 -0.000001648 -0.000000732 0.000005050 0.000006720 0.000000548 -0.000000665 -0.000000080 0.000002388 0.000006055 0.000001754 -0.000001217 -0.000000330 0.000002494 0.000003642 0.000000472 -0.000000119 -0.000000143 0.000000505 -0.000001591 0.000000686 -0.000000403 -0.000000086 0.000000849 -0.000000392 -0.000001446 0.000000819 0.000000326 -0.000001226 -0.000000477 -0.000001871 0.000001187 0.000000348 -0.000003015 -0.000002616 0.000000013 0.000000026 -0.000000023 0.000000530 0.000001041 -0.000001315 0.000000750 0.000000282 -0.000000933 0.000000512 -0.000000221 0.000000175 -0.000000071 -0.000000931 -0.000001869 0.000002915 -0.000001431 -0.000000455 -0.000001482 -0.000005143 -0.000005384 0.000002517 0.000002774 -0.000009645 -0.000014952 -0.000000703 0.000001101 -0.000000033 -0.000002414 -0.000005160 -0.000003218 0.000002218 0.000000732 -0.000003858 -0.000004126 0.000006268 -0.000003640 -0.000001421 0.000007205 0.000003527 0.000002096 -0.000001608 0.000000537 -0.000000086 -0.000001995 -0.000001730 0.000000952 0.000000219 -0.000000073 0.000002076 0.000004068 -0.000002340 -0.000001499 0.000005201 0.000007207 0.000004129 -0.000002292 -0.000000596 0.000004711 0.000002665 -0.000000248 -0.000000047 -0.000000118 -0.000000302 0.000000260 0.000004373 -0.000002986 -0.000000138 0.000001564 -0.000001314 0.000004146 -0.000002386 -0.000000342 0.000003787 0.000000254 0.000003126 -0.000001718 -0.000000174 0.000001911 -0.000001311 -0.000001980 0.000001250 0.000000474 -0.000003377 -0.000005122 -0.000002271 0.000001173 0.000000207 -0.000003202 -0.000000952 0.000002396 -0.000001456 -0.000000265 0.000002053 0.000001711 0.000001136 -0.000000649 -0.000000307 0.000000489 0.000001114 -0.000001714 0.000000811 0.000000003 -0.000001819 0.000000847 -0.000000425 -0.000000286 -0.000000442 -0.000000700 0.000002110 -0.000000338 0.000000329 0.000000024 -0.000000216 0.000000406 0.000004655 -0.000003130 -0.000000731 0.000004232 0.000002106 -0.000001206 0.000000395 0.000000450 -0.000003180 -0.000001631 0.000005274 -0.000002817 -0.000001096 0.000004226 0.000002203 0.000003380 -0.000002158 0.000000033 0.000002256 -0.000000289 0.000000529 -0.000000142 0.000000272 0.000000384 -0.000002043 0.000000176 0.000000077 -0.000000278 0.000001130 0.000000579 -0.000004215 0.000002610 0.000000563 -0.000005069 -0.000002406 0.000001765 -0.000001054 -0.000000122 0.000001789 -0.000000290 0.000001554 -0.000001251 -0.000000331 0.000001495 0.000003053 -0.000002387 0.000001369 0.000000092 -0.000002481 -0.000000932 -0.001454013 0.000414385 -0.000306485 0.000049671 0.001125821 0.000039778 0.001248102 0.000106769 -0.000628793 -0.000911992 -0.000505751 0.001270608 -0.000612364 0.000351235 0.000397945 0.000519435 -0.000468054 -0.000012112 0.000253094 0.000051090 0.000481146 -0.000198598 0.000245740 0.000090978 0.000144013 0.000848622 -0.000932280 0.000318919 0.000234088 -0.000117355 0.000759551 0.000283724 -0.000069307 0.000296696 -0.000058122 -0.000195540 -0.000111023 -0.000122562 0.000110445 -0.000088946 -0.000340618 -0.000009158 -0.000012846 -0.000204003 0.000483888 -0.000036935 0.000162210 -0.000090049 0.000526040 0.000237517 0.000528603 -0.000264075 0.000262455 0.000206104 0.000117319 -0.000112235 -0.000390459 0.000238836 -0.000101651 0.000311125 0.000010950 -0.000010678 -0.000005133 0.000247926 0.000323628 0.000743279 -0.000349593 0.000198977 -0.001234670 -0.001472835 -0.000255365 0.000275554 -0.000064604 0.000091171 0.000538831 -0.000095161 0.000012758 0.000019401 -0.000322052 -0.000128501 0.000059660 -0.000083436 0.000015261 -0.000042836 0.000116724 0.000258230 -0.000157646 -0.000051872 0.000585011 0.000283301 -0.000001456 0.000023785 -0.000084796 -0.000041390 0.000226675 -0.000124398 0.000048160 0.000104047 -0.000030770 0.000210472 0.000230754 -0.000108200 -0.000046874 0.000183161 -0.000044203 -0.000164709 0.000060583 -0.000076219 -0.000061711 0.000015974 0.000028819 -0.000036022 -0.000039583 0.000055716 -0.000032395 0.000399318 -0.000221665 0.000074839 0.000144242 0.000052697 0.672642717 0.110605804 0.171550327 -0.007631983 0.038756077 0.761014491 0.039931475 0.005164224 -0.027719955 0.704455350 0.000821141 0.008358717 -0.008402065 0.124284709 0.177965578 -0.082368541 -0.020755303 -0.026252591 0.023906873 0.044516254 0.035656943 0.007381418 0.030018730 -0.053443903 -0.011912349 0.011273221 0.011206635 0.003443389 -0.015152645 0.006855604 0.082660386 0.014812952 -0.024228891 -0.026244135 -0.001360630 -0.297698513 -0.039075456 0.130378533 -0.020312577 -0.000728799 -0.042100441 -0.075323994 0.018908443 -0.000563731 -0.008019478 0.057944243 0.004534886 -0.188299172 0.032537869 0.003297019 -0.288450896 -0.056516532 -0.130316131 -0.130706030 -0.010775250 -0.052320478 -0.081193554 -0.036344435 -0.016673416 -0.071105710 -0.057117896 -0.019963250 -0.191991055 -0.029187003 -0.025612821 0.001706855 -0.001211472 0.000759985 -0.258308144 -0.057328151 -0.001109982 0.007047784 -0.000736695 -0.056828798 -0.053065011 0.001592867 -0.000504599 -0.005378132 -0.118477034 -0.033255432 0.001608003 -0.001000168 -0.000321661 -0.001942348 -0.001833386 -0.001358910 0.007144705 -0.000888442 -0.001986981 0.006022517 -0.000810547 -0.001082064 -0.005560521 -0.002717983 -0.001229895 -0.014681980 -0.004438016 -0.014982739 0.000296869 0.000283834 -0.003477932 0.003558546 -0.002439994 0.000355080 -0.000621014 0.015391047 0.003569638 0.012402949 0.000871655 0.000186240 -0.015953490 -0.003456101 0.015820171 0.003583809 -0.000278920 -0.005216413 0.003129135 0.004093200 0.001958809 0.004150505 -0.015348522 -0.002826327 0.011992609 0.028391406 0.005552196 -0.060043055 -0.003871589 0.005259103 -0.003761563 -0.002594718 -0.003708041 -0.042382106 -0.017089835 -0.002662331 0.006747540 0.005408780 -0.017812096 -0.343689608 -0.002767306 -0.001043776 -0.000106859 -0.000033653 0.000276416 0.000589648 0.000012166 -0.000054300 -0.000027970 0.000095173 0.000287869 0.000018243 -0.000070755 -0.000009485 0.000109823 0.000222474 0.000002636 0.000017311 0.000020738 -0.000137521 -0.000327860 0.000003956 0.000024762 0.000019796 -0.000078922 -0.000251244 0.000007013 -0.000002320 -0.000007753 0.000027080 0.000101550 -0.000011765 -0.000003765 -0.000005636 -0.000021027 -0.000006903 -0.000006071 -0.000000023 -0.000000532 -0.000013484 -0.000021759 -0.000001763 0.000003367 0.000000163 -0.000005758 -0.000007173 -0.000000325 -0.000200212 0.000036950 0.000178750 -0.001100552 0.000381658 0.001444665 0.000492183 0.001058651 0.002999340 -0.000520919 0.000255397 0.000241888 0.001117947 -0.000267201 -0.000098496 -0.001084535 0.000263230 -0.000205079 -0.000552939 0.000703063 -0.000256259 -0.000508716 -0.001142703 0.000605867 -0.001932485 -0.001150889 -0.001245556 -0.003407493 -0.001004822 0.001057841 0.001167678 0.000307462 0.000912528 0.000549487 -0.000123706 0.000970764 0.000300486 0.000274690 -0.000272260 0.000643844 0.000285790 0.000252181 0.000864234 0.000129723 -0.000330270 -0.000399549 -0.000087334 -0.000427735 -0.000702005 -0.000181008 -0.000302148 -0.000203072 -0.000119448 -0.000303084 0.000001173 0.000248135 -0.000134497 -0.000317184 -0.000068801 -0.000060919 0.000034792 0.000014413 0.000088008 0.000101118 0.000051224 0.000048927 0.000045590 0.000041869 0.000030964 0.000019314 -0.000041344 0.000029109 0.000053016 0.000022605 0.000007466 0.000109935 0.000090309 0.000058007 0.000097178 0.000066810 0.000056020 0.000109401 0.000047420 -0.000026157 -0.000009272 0.000058123 0.000027002 -0.000045657 -0.000102457 0.000030429 0.000048848 -0.000015104 0.000032204 0.000094886 0.000028985 0.000084099 0.000025690 -0.000023738 0.000013944 0.000001952 0.000021056 0.000032077 0.000005820 0.000009423 0.000005915 -0.000039303 -0.000378716 -0.000613080 -0.000706877 -0.000566078 -0.000860891 -0.000240803 -0.000196067 0.000709218 -0.001542657 -0.000546243 0.000781576 0.001617107 -0.000576342 0.001470003 0.000117205 -0.000117849 -0.000198773 0.000087554 -0.000196954 0.000080484 -0.000742531 -0.000302146 -0.000319081 -0.001081386 0.000180313 0.000186438 -0.000667667 0.000027713 -0.000461722 -0.000011583 -0.000006390 -0.000021419 0.000002880 -0.000010344 0.000010998 -0.000012694 -0.000020769 -0.000010984 -0.000003426 0.000007559 0.000010680 0.000011215 -0.000001442 0.000004119 0.000004266 0.000004107 0.000005973 0.000001087 0.000000666 0.000010325 0.000005716 0.000015691 0.000010735 0.000007364 -0.000015887 -0.000008245 -0.000013275 -0.000026167 -0.000008837 -0.000003445 -0.000001049 0.000002244 -0.000002398 0.000000456 -0.000003659 -0.000007005 -0.000030176 -0.000020967 -0.000009063 0.000001131 -0.000004599 0.000012451 0.000026961 0.000006051 -0.000119407 0.000016235 0.000051866 0.000076465 0.000022054 -0.000036517 0.000004821 -0.000024465 0.000075228 0.000045584 -0.000083998 -0.000089799 -0.000017344 0.000118911 -0.000051104 -0.000026643 -0.000010070 0.000010679 0.000044709 -0.000008931 0.000024084 0.000031665 0.000014655 -0.000068015 0.000016774 -0.000046804 -0.000013413 0.000035390 0.000069733 -0.000016784 0.000022590 -0.000009230 -0.000041769 -0.000065400 0.000011583 -0.000004723 0.000014046 -0.000002473 -0.000017704 0.000013397 0.000023336 0.000046307 0.000048122 -0.000060354 0.000000846 -0.000010209 0.000030179 0.000001918 -0.000023327 -0.000000877 -0.000068055 0.000025913 0.000049807 0.000029387 0.000012801 -0.000044806 -0.000003418 0.000056949 0.000019458 0.000000993 0.000004121 -0.000005140 -0.000008182 0.000003254 0.000001612 0.000027598 -0.000000977 0.000002678 0.000013915 0.000004599 0.000001572 0.000008114 0.000023796 0.000016892 0.000003039 -0.000004746 0.000000126 0.000005661 -0.000001092 0.000000358 0.000012337 0.000014068 -0.000009449 -0.000028916 -0.000006583 -0.000011404 -0.000001746 0.000004708 0.000002617 -0.000003138 0.000232919 0.000554312 0.000022088 -0.000147424 0.000072760 0.000151936 -0.000353508 0.000479975 -0.000208737 -0.000844091 -0.000168389 0.000137520 -0.000163569 0.000047027 -0.000243467 -0.000182790 -0.000155438 -0.000049089 -0.000002460 -0.000045817 0.000084377 0.000165850 0.000115230 -0.000003022 0.000054398 0.000036396 -0.000078526 0.000064683 0.000059362 -0.000085784 -0.000031724 0.000110869 0.000107992 -0.000015936 0.000116277 -0.000016165 -0.000057642 -0.000074365 -0.000026727 -0.000007887 0.000096530 0.000216961 0.000233024 -0.000159855 0.000271308 -0.000007549 -0.000000574 -0.000012706 -0.000009468 -0.000001425 -0.000002971 0.000001603 0.000012912 0.000002834 0.000005227 0.000002109 0.000000387 -0.000043793 -0.000029159 -0.000008120 0.000000311 -0.000002996 -0.000029173 -0.000010137 -0.000007637 -0.000004472 0.000001079 -0.000060444 -0.000033169 -0.000013922 0.000017757 0.000004696 0.000028152 0.000001068 0.000003844 -0.000002801 0.000002691 -0.000024385 -0.000008890 0.000000843 -0.000025543 -0.000001118 -0.000094834 -0.000049703 -0.000008594 -0.000008224 0.000000841 -0.000063987 -0.000031091 -0.000010852 -0.000001208 -0.000000958 0.000025251 0.000013227 -0.000000757 -0.000015260 0.000020341 -0.000155947 -0.000070975 -0.000018242 0.000085602 0.000012429 0.000220932 0.000083623 0.000029511 0.000005952 -0.000003388 0.000003362 0.000007065 0.000001177 0.000012473 -0.000001472 0.000114445 0.000075536 0.000019735 0.000002963 -0.000009164 0.000043191 0.000019722 0.000005351 0.000003418 0.000003049 -0.000025965 -0.000016514 -0.000003409 -0.000002286 0.000000772 -0.000000123 0.000000701 -0.000002523 0.000017123 0.000000393 0.000092208 0.000062162 0.000016610 -0.000005109 0.000000016 -0.000019161 -0.000023290 -0.000002630 0.000000343 0.000000229 -0.000006217 -0.000007638 -0.000000928 0.000000031 -0.000000062 -0.000011397 -0.000014265 -0.000002715 -0.000017090 0.000001054 -0.000001363 0.000007472 0.000009189 0.000007031 -0.000000570 0.000002957 -0.000010695 -0.000004869 -0.000004602 0.000000983 -0.000051942 -0.000048226 -0.000012266 0.000311013 0.000044255 0.001120609 0.000547532 0.000147077 -0.000393821 -0.000523851 0.000347363 0.000474875 0.000208644 -0.000635799 -0.000340849 -0.000842262 -0.000198646 -0.000046374 -0.000002368 0.000003511 0.000029179 0.000017215 0.000004391 0.000011473 -0.000000283 0.000038272 0.000019805 0.000006175 -0.000010290 -0.000000750 -0.000002399 -0.000003234 -0.000001826 -0.000005314 0.000001199 -0.000005219 -0.000002333 -0.000001440 -0.000001068 0.000000413 -0.000013822 -0.000006975 -0.000002665 -0.000000369 -0.000001376 0.000007561 0.000003315 0.000000753 -0.000000471 0.000003722 0.000016675 0.000000807 0.000002353 0.000005849 0.000000059 0.000005620 0.000007846 0.000001672 -0.000001586 -0.000003289 -0.000006180 0.000001038 -0.000001894 -0.000000565 -0.000004199 -0.000009561 0.000009547 -0.000003005 0.000000246 -0.000001827 -0.000013241 -0.000007651 -0.000001433 -0.000000352 -0.000000396 -0.000005649 -0.000009249 -0.000002182 -0.000006988 -0.000001353 0.000009930 0.000014914 -0.000002470 0.000000094 0.000005846 0.000021870 -0.000001894 0.000004363 0.000000672 0.000000897 0.000004882 0.000003623 0.000001301 0.000005697 0.000002296 -0.000001871 -0.000012647 0.000002497 0.000000959 0.000000914 -0.000001759 -0.000006582 -0.000000062 -0.000000915 0.000000577 0.000000424 -0.000006702 -0.000000602 -0.000000807 0.000001320 0.000001015 -0.000007008 0.000000593 -0.000004847 -0.000002380 0.000004785 0.000020521 -0.000002403 -0.000002777 -0.000001389 -0.000000062 0.000003175 -0.000001392 0.000000796 -0.000001087 -0.000004902 -0.000000126 -0.000001149 -0.000005443 -0.000002741 -0.000004709 0.000001948 -0.000002978 0.000004387 0.000001529 0.000003905 0.000003502 0.000001691 0.000004315 0.000003917 0.000009162 0.000005977 0.000006132 0.000000584 -0.000001915 -0.000005407 -0.000001358 -0.000000624 0.000004520 0.000004811 0.000012194 0.000001251 0.000004144 0.000005642 -0.000016315 -0.000051251 0.000069272 0.000002616 0.000032074 0.000017030 -0.000010313 -0.000107049 0.000009916 0.000018955 0.000019905 0.000044967 -0.000044008 0.000006948 0.000000936 0.000000613 -0.000001692 -0.000003449 0.000000918 0.000000450 0.000000336 -0.000001124 -0.000006116 0.000000020 -0.000000796 -0.000001109 0.000005180 0.000022681 -0.000000330 0.000000461 0.000000346 0.000000504 -0.000001079 0.000000150 -0.000000045 -0.000000163 -0.000002585 -0.000005515 -0.000000536 0.000000980 -0.000000088 -0.000001718 0.000002758 -0.000000496 -0.000376482 -0.000233072 -0.000779556 -0.000238903 -0.000057024 0.000122372 0.000180872 0.000017698 -0.000085728 -0.000061871 0.000341877 0.000197676 0.000188386 0.000038714 -0.000004527 0.000023484 0.000177455 -0.000741768 -0.000471324 -0.000172696 0.000352934 0.000263314 -0.000130584 -0.000237950 -0.000109361 0.000231033 0.000081631 0.000167178 -0.000007689 -0.000018165 -0.000001010 0.000006498 0.000010362 -0.000044891 -0.000000031 -0.000022518 -0.000015500 -0.000002348 0.000096405 -0.000005894 -0.000010859 -0.000009078 -0.000022907 0.000018073 -0.000001193 -0.000002193 0.000010603 0.000031454 -0.000059200 -0.000004820 -0.000010226 -0.000003458 0.000007303 0.000027187 -0.000003314 -0.000010913 -0.000014636 -0.000042470 0.000012444 -0.000004408 0.000002856 0.000000153 -0.000002713 0.000001457 -0.000000924 -0.000000568 -0.000000184 -0.000006378 -0.000003311 -0.000001389 0.000000582 0.000000303 0.000000727 0.000001698 0.000000978 -0.000005439 -0.000000734 -0.000005213 -0.000008627 -0.000001048 -0.000001358 -0.000000174 -0.000010256 -0.000008678 -0.000001996 0.000001765 0.000000145 0.000007429 0.000006093 0.000001508 -0.000002191 -0.000000043 0.000009264 0.000002679 0.000002021 0.000000288 0.000000465 -0.000001525 -0.000000288 0.000000029 -0.000001669 -0.000000060 0.000005794 0.000002080 0.000001051 0.000001467 0.000000314 -0.000000027 0.000000740 0.000000026 0.000000382 0.000000292 -0.000003063 -0.000000894 -0.000000602 -0.000000464 0.000000115 0.000007491 0.000004421 0.000001860 0.000000635 0.000000252 0.000002055 0.000001613 0.000000626 -0.000000191 -0.000000376 0.000000886 -0.000000329 -0.000000091 0.000000933 -0.000000037 -0.000001389 -0.000000197 -0.000000356 0.000001050 0.000000170 -0.000001716 0.000000018 -0.000000412 0.000000440 -0.000000195 -0.000000766 -0.000000552 -0.000000338 -0.000000196 -0.000000105 0.000001193 0.000000214 0.000000178 0.000003072 0.000000344 -0.000001326 0.000002261 -0.000000333 0.000000314 0.000000483 0.000004241 0.000003377 0.000001138 -0.000000814 -0.000000320 -0.000007416 -0.000004199 -0.000001870 -0.000000026 -0.000000316 -0.000007478 -0.000004415 -0.000002035 -0.000000204 0.000000035 -0.000003371 -0.000001186 -0.000000835 -0.000000065 0.000000268 0.000002688 0.000001601 0.000000870 -0.000000817 -0.000000124 -0.000000428 -0.000000718 0.000000032 -0.000000170 -0.000000285 -0.000001422 -0.000001864 -0.000000474 0.000001066 0.000000120 0.000003698 0.000002704 0.000000892 0.000000226 0.000000107 -0.000000980 -0.000000414 -0.000000142 0.000000593 -0.000000053 -0.000001205 -0.000000744 -0.000000278 -0.000000589 -0.000000301 0.000001545 0.000000294 0.000000126 0.000000373 0.000000486 0.000010070 0.000007921 0.000002367 -0.000001635 -0.000000614 0.000007245 -0.000001005 0.000002159 0.000000572 0.000000217 0.000006763 0.000004084 0.000001777 -0.000000363 -0.000000444 0.000001120 -0.000001293 0.000000271 -0.000000042 0.000000418 0.000001054 0.000004006 0.000000483 -0.000000094 0.000000571 0.000003264 0.000001909 0.000000686 -0.000000586 -0.000000839 -0.000005458 -0.000004698 -0.000001528 0.000000678 0.000000203 -0.000002608 0.000001775 -0.000000983 -0.000002374 -0.000000039 -0.000004455 -0.000003563 -0.000000914 0.000000128 -0.000000371 -0.000000012 -0.000000206 -0.000000324 -0.000000360 0.000000781 0.000004413 0.000004151 0.000001135 -0.000001302 0.000000655 0.000000290 -0.000000172 0.000000424 -0.000001030 0.000000617 0.000001833 0.000001082 0.000000747 -0.000000161 -0.000000260 0.000003937 0.000000914 0.000000913 0.000000854 -0.000000472 0.000001486 0.000001093 -0.000000140 -0.000000098 0.000000609 0.000000093 0.000000923 0.000000021 0.000000391 0.000000256 0.000001052 0.000001600 -0.000000037 0.000000790 -0.000000471 -0.000000375 0.000000299 -0.000000587 0.000002149 0.000000278 0.000002423 0.000004316 0.000000039 -0.000001614 -0.000000914 -0.000004001 -0.000004331 -0.000001050 0.000000183 0.000000838 0.000002185 0.000003284 0.000000516 0.000001112 0.000000064 0.000003096 0.000002949 0.000000445 -0.000000095 0.000000704 0.000002472 0.000003798 0.000000462 -0.000000308 0.000000888 0.000002180 0.000002146 0.000000867 -0.000000785 0.000000183 0.000000674 -0.000000518 0.000000646 -0.000000292 -0.000000206 -0.000001066 -0.000001066 -0.000000260 0.000000676 -0.000000545 0.000000777 -0.000000158 -0.000000061 -0.000000555 0.000000347 0.000000574 0.000000198 0.000000381 0.000000654 0.000000333 -0.000000464 0.000001485 -0.000000344 0.000000468 -0.000000593 0.000000271 0.000000003 -0.000000234 0.000420617 0.000049888 -0.000031274 0.001129022 0.000584403 -0.000220938 0.000051452 0.000133839 -0.000218248 0.000057528 0.000039118 0.000015291 -0.000046013 -0.000160011 -0.000183084 -0.000025235 -0.000010708 -0.000023695 0.000010871 -0.000028382 -0.000015988 -0.000021759 -0.000055372 0.000037528 0.000007703 -0.000050840 -0.000014590 0.000009596 -0.000132464 -0.000003618 -0.000010273 0.000031359 0.000006749 -0.000598394 -0.000297735 -0.000042888 -0.000041867 -0.000086825 0.000256799 -0.000065625 0.000170767 0.000039377 0.000013450 0.000079202 0.000127889 -0.000006040 -0.000034372 -0.000063702 -0.000226875 -0.000194478 -0.000007979 -0.000011847 -0.000042382 -0.000173767 -0.000082274 0.000115371 -0.000010885 -0.000041762 0.000385563 0.000170747 0.000053353 0.000024342 0.000081872 -0.000012018 -0.000122359 -0.000014112 0.000141242 0.000318927 -0.000438736 0.000236535 -0.000037574 -0.000031563 -0.000126392 0.000038368 -0.000076637 0.000005915 0.000019539 0.000007005 -0.000064447 0.000049385 -0.000001757 -0.000007961 -0.000039000 0.000036208 0.000031037 -0.000005281 -0.000067932 -0.000132810 0.000045652 -0.000104196 -0.000034665 -0.000016996 -0.000060087 -0.000032152 -0.000003286 0.000011434 -0.000004497 -0.000037860 -0.000027615 -0.000017389 -0.000038804 -0.000023176 -0.000031466 0.000029824 -0.000041841 -0.000000327 0.000004959 0.000032645 0.000069232 0.000027831 0.000000308 -0.000004593 -0.000023286 -0.000042930 -0.000009970 -0.000022739 -0.000011347 -0.000015285 -0.000030973 -0.000027726 0.726816148 0.022251445 0.717539340 0.010048720 0.108366353 0.168475045 0.068719677 -0.038672074 0.036257489 0.719922253 0.032806447 -0.130227437 -0.014839199 -0.032372206 0.729769061 0.003002151 -0.009637321 -0.070524832 -0.026788996 0.116675961 -0.058709566 0.039818753 -0.013146330 -0.365923828 0.021749679 0.043159187 -0.017813808 -0.004617321 -0.029806616 -0.054370785 -0.010922005 -0.004529994 -0.009538243 -0.010272643 -0.015244039 -0.364168330 -0.030929711 -0.010341788 -0.059032417 -0.027786920 -0.118227448 -0.002709167 -0.001714292 0.004000359 0.000201233 -0.032599481 -0.001554330 0.005959179 0.000684808 0.000381802 -0.130504567 0.002853097 0.000116231 -0.001159234 0.000732886 -0.003625972 -0.280546254 -0.035304780 0.117265392 0.003316612 -0.001439664 -0.035266494 -0.043413914 0.014370572 0.002118103 -0.001485901 0.114153964 0.014078598 -0.120000979 0.029589682 0.000962234 0.005534219 0.000597103 0.003404515 -0.266731496 0.000037657 -0.001457951 0.004140940 0.000038749 -0.049288054 -0.000671604 -0.027152650 -0.006076403 -0.010315249 -0.119158651 -0.002789934 0.000293327 0.000154770 -0.000924782 -0.002600918 -0.001455541 0.000236756 -0.000719423 -0.000253792 -0.002258048 -0.009506858 -0.000886567 -0.000190835 -0.000695840 -0.002957671 -0.002263810 -0.004022773 -0.002080858 0.002531755 0.004918464 -0.000793019 -0.002089665 0.006884170 -0.000051150 0.000050655 0.000405183 0.002841719 0.000135070 0.000384960 -0.003179874 -0.000020399 -0.000588121 0.000032365 0.000545722 -0.000088640 -0.000062720 -0.000282608 0.000019847 0.000167751 -0.000026916 -0.000003236 -0.000829366 -0.000106836 0.000440775 0.000195179 0.000021447 0.000047668 -0.000062881 -0.000095332 0.000201809 0.000039726 -0.000003523 -0.000081951 -0.000029452 0.000135274 -0.000010429 0.000001642 0.000026725 0.000017654 -0.000068960 -0.000017801 0.000015448 -0.000001443 -0.000016853 0.000019320 -0.000001993 0.000015561 -0.000000646 -0.000015667 0.000015347 0.000005928 0.000012796 -0.000005585 -0.000012715 0.000000264 0.000714924 0.000782844 0.000196682 0.001194425 0.000247312 0.001351841 -0.002749700 -0.000898489 -0.003488854 -0.001979880 0.001564548 0.000431420 0.000165655 0.000710429 -0.000390436 -0.001170067 0.000861705 0.000086248 0.000910387 0.000729232 -0.001179223 0.000406336 -0.001204703 -0.000469318 0.000237007 -0.003436019 0.000935065 0.000627434 0.001399434 0.002425171 0.002208826 -0.001679076 0.001181917 -0.000542699 -0.000896509 0.001534505 -0.000471060 0.000248436 0.000166425 -0.000525789 0.000601931 -0.000105240 0.000594445 -0.000964638 -0.000453268 -0.001030878 0.001670992 -0.000817332 -0.000503061 0.000302894 -0.000466047 -0.000201172 0.000250003 0.000423764 0.000622471 0.000131679 -0.000109540 -0.000319789 0.000098616 -0.000007699 0.000144913 -0.000256726 0.000157256 0.000154574 -0.000028215 0.000087078 0.000034084 -0.000033240 -0.000102617 -0.000112877 -0.000029548 -0.000013409 0.000053842 0.000001253 0.000002188 0.000145060 0.000119203 -0.000900179 0.000199427 -0.000309743 -0.000018863 0.000365486 -0.000605170 -0.000391213 -0.000311819 0.000045621 -0.000258372 -0.000288575 -0.000349456 0.000093079 0.000131547 -0.000266210 0.000084722 0.000129336 -0.000037901 0.000073034 0.000089121 -0.000084792 -0.000090999 -0.000129346 0.000020557 -0.000000884 -0.000062512 -0.000001669 -0.000035304 -0.000794840 0.000310594 -0.000362757 -0.000085329 0.000301763 0.000049939 0.000096140 0.000688275 0.000845610 0.000778212 0.000065893 -0.000010567 -0.000033076 -0.000086180 -0.000439488 0.000261114 -0.000407074 -0.000007890 0.000078683 -0.000296510 0.000540142 0.000178161 -0.000001867 -0.000154041 -0.000390148 0.000374140 0.000311350 -0.000430111 0.000513288 0.000180294 -0.000035978 0.000022151 -0.000002357 -0.000018691 0.000017484 0.000002624 -0.000016225 -0.000001003 0.000005172 0.000014382 0.000018456 0.000023856 -0.000021193 -0.000019887 -0.000025633 0.000010811 -0.000001854 0.000002292 -0.000007012 -0.000008676 0.000026034 -0.000018626 0.000015773 0.000006603 -0.000018539 -0.000029807 0.000040460 -0.000033155 0.000004855 0.000019307 -0.000002468 -0.000009302 0.000006203 0.000007008 0.000005116 -0.000036430 0.000059969 -0.000031481 -0.000034067 0.000010050 0.000023363 -0.000069068 0.000041306 0.000044173 0.000007652 -0.000050724 -0.000419624 -0.000251301 0.000212715 0.000138523 -0.000009866 -0.000690268 -0.000664244 0.000332587 0.000170507 -0.000002935 -0.000062155 0.000838188 0.000345724 0.000260204 -0.000002839 -0.000057701 0.000156862 0.000015445 0.000033260 -0.000024045 0.000342441 -0.000278785 -0.000057675 -0.000147444 -0.000009609 0.000003400 0.000270694 0.000142499 0.000014217 0.000005111 -0.000095470 -0.000008794 -0.000009160 0.000062733 0.000012839 0.000115052 -0.000014802 0.000105738 -0.000007131 -0.000029406 0.000370917 -0.000078654 -0.000092877 -0.000263359 -0.000019163 0.000007482 0.000016671 -0.000053885 0.000040659 -0.000026576 0.000013340 0.000084211 -0.000019372 0.000026385 -0.000026894 0.000009001 0.000071200 -0.000012299 0.000013910 0.000008527 -0.000001699 -0.000002538 0.000003204 -0.000008583 0.000030069 -0.000044256 0.000001723 0.000028369 -0.000020439 0.000022562 -0.000036622 0.000029829 -0.000016876 0.000000653 -0.000008784 -0.000001316 0.000008719 0.000003242 0.000005823 -0.000020413 0.000055066 -0.000028906 -0.000039570 0.000001781 -0.000015620 0.000060149 -0.000006176 -0.000021934 -0.000026523 -0.000354502 -0.000143855 0.000198863 0.000161727 -0.000084289 0.000065481 0.000160052 -0.000348248 -0.000249810 0.000394818 -0.000241241 0.000177707 0.000068942 -0.000154361 -0.000356018 0.000183069 0.000125495 0.000108293 -0.000089052 0.000005331 -0.000058521 -0.000067548 -0.000126832 0.000061676 0.000016350 0.000108221 -0.000065647 0.000100252 -0.000098278 -0.000108647 -0.000094688 0.000053027 0.000019442 -0.000142873 0.000074865 0.000027002 -0.000037103 -0.000007798 0.000073707 -0.000046369 -0.000225034 -0.000036692 -0.000033530 -0.000042395 0.000076075 -0.000003645 -0.000020145 0.000006595 0.000004753 0.000032891 0.000002732 -0.000020355 -0.000007456 0.000033019 0.000005311 0.000003725 0.000018918 -0.000017312 -0.000045789 0.000031533 -0.000000179 0.000017966 0.000020431 -0.000040034 0.000006404 -0.000005966 0.000014819 0.000033657 -0.000073147 0.000045229 0.000004928 0.000055989 -0.000014463 -0.000016747 -0.000061108 0.000009627 -0.000067613 -0.000026002 0.000037439 0.000060715 0.000007186 -0.000076462 -0.000050221 -0.000001314 0.000131945 -0.000002534 -0.000009610 0.000008243 -0.000073216 0.000052501 -0.000018347 0.000061453 0.000063746 -0.000042024 0.000091436 0.000015668 -0.000053416 -0.000005784 -0.000016912 0.000093478 0.000015080 0.000119081 -0.000000602 0.000041922 -0.000226399 0.000004564 -0.000015407 -0.000012066 0.000023962 -0.000007022 -0.000002255 0.000015259 -0.000005043 0.000101556 -0.000102995 -0.000003556 -0.000016645 -0.000000836 0.000036638 -0.000028620 0.000005392 0.000016156 -0.000004485 -0.000025728 0.000012901 -0.000007412 0.000010434 0.000026024 -0.000008745 -0.000006076 0.000003441 0.000018376 -0.000013742 0.000068893 -0.000110874 -0.000004802 -0.000002029 0.000005685 -0.000011939 0.000029326 0.000002883 -0.000000610 -0.000004841 -0.000005187 0.000007157 -0.000003324 0.000011683 0.000004938 -0.000015431 0.000008716 0.000002237 -0.000105491 -0.000080916 0.000126776 0.000063647 0.000000219 0.000064136 0.000007586 -0.000071279 -0.000026828 -0.000002908 0.000023451 0.000027588 -0.000071155 0.000043578 0.000018059 0.000124939 -0.000001519 0.000781991 -0.001111571 -0.000049455 -0.000734041 -0.000965225 0.002089257 0.000619321 -0.000121573 -0.001049151 -0.000061753 0.000607460 0.001959644 -0.000004880 0.000006341 0.000008578 0.000017184 -0.000026129 0.000002614 0.000018497 -0.000007139 0.000022617 -0.000050434 -0.000006505 -0.000009079 0.000013623 0.000002438 0.000021742 -0.000004719 -0.000002583 0.000008377 -0.000003466 0.000008634 0.000000079 0.000001257 0.000003567 -0.000014208 0.000010693 -0.000001675 0.000001583 -0.000000109 0.000006113 -0.000003747 0.000005712 -0.000013440 0.000003312 0.000017698 -0.000011524 0.000010333 -0.000007384 -0.000004297 0.000003671 -0.000012458 -0.000008492 0.000000881 0.000000048 -0.000000498 0.000005589 -0.000010651 0.000002903 -0.000001534 -0.000006031 0.000004168 -0.000005114 0.000015443 -0.000002122 -0.000015402 0.000009713 -0.000001916 0.000007492 -0.000000316 -0.000006332 0.000006598 -0.000016009 -0.000020736 0.000007202 0.000023048 -0.000004158 0.000011707 -0.000015388 0.000004712 0.000021090 -0.000014270 0.000003643 -0.000004269 0.000000267 0.000004017 -0.000005629 0.000014398 0.000011587 -0.000005473 -0.000012036 -0.000002026 0.000000996 0.000005168 -0.000001337 -0.000002879 0.000001156 -0.000002041 0.000001695 0.000001350 0.000002569 0.000002751 -0.000000471 0.000000874 0.000002409 0.000002210 0.000002092 -0.000013259 -0.000015221 0.000003472 0.000013700 -0.000003907 -0.000008026 -0.000003838 0.000002460 0.000004769 0.000002102 -0.000002088 0.000004033 -0.000001579 -0.000005520 0.000001890 -0.000013938 -0.000000945 0.000003315 0.000002156 0.000008566 0.000009463 -0.000001743 -0.000003616 -0.000000449 -0.000008885 0.000016975 -0.000003384 -0.000001325 0.000001542 -0.000010310 -0.000001179 0.000005363 -0.000001453 -0.000005424 0.000003012 0.000018398 -0.000005720 -0.000001871 0.000003747 -0.000012910 0.000006429 0.000045469 -0.000015624 -0.000084057 0.000013454 0.000082106 0.000074113 -0.000027122 -0.000061957 -0.000000404 0.000061390 -0.000017593 -0.000009388 0.000029269 -0.000040732 0.000003094 0.000004609 -0.000000304 -0.000003817 0.000001020 0.000001059 0.000004268 0.000000048 -0.000002037 0.000001745 -0.000000695 -0.000012688 0.000000241 0.000005692 -0.000008415 0.000001218 -0.000000449 -0.000000297 0.000000241 -0.000000573 -0.000000962 0.000003480 -0.000000487 -0.000002711 0.000003406 0.000001244 0.000002277 -0.000001451 -0.000003978 -0.000001769 -0.000027023 -0.000585726 -0.000160321 0.000288452 0.000414062 0.000006840 0.000238851 0.000403289 -0.000678703 -0.000618103 0.000123732 0.000577052 0.000181312 -0.000326470 -0.001254752 0.000052110 -0.000318012 0.000440073 -0.001160149 -0.000418664 0.000064624 0.000444665 0.000595001 -0.001050726 -0.000232423 0.000048190 0.000228822 0.000125191 -0.000640303 -0.000469942 -0.000001416 -0.000000367 0.000004343 0.000019476 0.000004266 -0.000058872 -0.000048036 0.000017197 0.000029778 0.000003145 -0.000031526 0.000011177 0.000007445 -0.000012623 0.000024251 -0.000004036 -0.000024503 0.000007171 0.000050418 -0.000007003 -0.000027823 -0.000028545 0.000009726 0.000028610 -0.000001126 -0.000039100 0.000032203 0.000002317 -0.000036089 0.000036494 0.000003266 0.000004826 -0.000004424 -0.000006961 -0.000005514 -0.000000709 0.000002269 -0.000000556 -0.000006863 0.000004735 0.000001763 -0.000002722 -0.000000484 0.000001884 -0.000001490 -0.000007779 -0.000002559 0.000008346 0.000000380 0.000015336 -0.000002999 0.000006799 0.000000154 -0.000011539 0.000009809 0.000003557 -0.000005263 -0.000001221 0.000008120 -0.000008251 -0.000002563 -0.000006570 0.000003274 0.000013683 -0.000000678 0.000000765 -0.000000011 0.000000484 -0.000001821 0.000000048 -0.000002534 -0.000003275 0.000001807 0.000008298 -0.000000560 0.000001937 0.000002220 -0.000002287 -0.000002132 -0.000002920 0.000000378 0.000002278 -0.000000537 -0.000004570 0.000000447 -0.000000650 -0.000004836 0.000000953 0.000010230 -0.000004129 0.000000868 -0.000000477 -0.000000685 0.000001904 -0.000002757 -0.000000373 -0.000000086 -0.000000126 0.000001123 0.000000447 0.000001510 0.000000910 -0.000001215 -0.000002527 -0.000000716 0.000001826 0.000001089 -0.000001056 -0.000003227 -0.000001175 0.000000636 0.000000775 -0.000000611 -0.000001388 -0.000000001 -0.000000202 -0.000000575 0.000000122 0.000001543 0.000000007 0.000004325 0.000003262 -0.000004448 -0.000005240 -0.000005801 0.000000728 -0.000002498 -0.000000019 0.000004760 -0.000003615 -0.000001972 0.000004708 0.000000533 -0.000009018 0.000005349 -0.000000402 0.000004621 -0.000000284 -0.000009659 0.000004337 -0.000000467 0.000001442 0.000000345 -0.000004107 0.000001668 0.000000179 -0.000001367 -0.000000001 0.000003241 -0.000001425 -0.000001543 -0.000000155 0.000000816 0.000000543 0.000001853 -0.000000435 0.000001016 0.000000079 -0.000001433 0.000001860 0.000001880 -0.000001876 -0.000001079 0.000003804 -0.000004087 0.000000356 0.000000875 -0.000000343 -0.000001613 0.000000198 0.000001028 0.000000969 -0.000000812 -0.000002042 0.000000181 -0.000001191 -0.000000753 0.000000551 0.000002519 0.000000139 0.000001516 -0.000006610 0.000000101 0.000011933 -0.000008188 -0.000001609 -0.000008580 0.000003185 0.000014204 0.000002604 0.000001364 -0.000003592 -0.000000001 0.000008032 -0.000004959 -0.000001124 -0.000000636 0.000000488 0.000003081 0.000000686 -0.000000006 -0.000001022 -0.000000188 0.000000838 -0.000001761 0.000000381 -0.000003321 0.000000725 0.000004388 -0.000002203 -0.000001693 0.000003533 -0.000000056 -0.000005627 0.000005209 0.000000881 0.000002639 -0.000001251 -0.000005417 -0.000001884 -0.000004094 0.000001806 0.000002190 -0.000003562 0.000006759 0.000000313 0.000000559 -0.000000510 -0.000000562 -0.000000037 0.000000671 -0.000004558 0.000000780 0.000004994 -0.000002700 -0.000001673 -0.000000778 0.000001544 0.000000741 0.000002128 -0.000001085 -0.000002242 0.000001666 0.000002921 0.000000505 0.000000057 -0.000002538 0.000000497 0.000005607 -0.000001132 0.000001353 -0.000000397 -0.000001142 0.000001152 -0.000002648 0.000000034 -0.000000303 0.000000297 -0.000000539 -0.000000770 0.000000714 -0.000000244 -0.000000203 0.000000283 -0.000002468 0.000001228 0.000000597 -0.000001066 -0.000001212 -0.000001503 0.000004215 -0.000000987 -0.000001872 -0.000000225 -0.000006561 -0.000003236 0.000002353 0.000000882 -0.000002834 0.000005791 0.000000947 -0.000001647 0.000000116 0.000001177 -0.000002790 0.000002324 -0.000002742 -0.000000778 0.000003206 -0.000004425 0.000000078 -0.000001093 0.000000301 0.000001729 -0.000003309 -0.000000090 -0.000002521 0.000000668 0.000002734 -0.000001225 -0.000001388 -0.000000993 0.000000959 0.000002202 0.000001640 -0.000000764 0.000001319 0.000000199 -0.000001133 0.000001328 0.000001078 -0.000000271 -0.000000631 0.000001129 -0.000001429 -0.000000753 -0.000000633 0.000000682 0.000000916 0.000000829 0.000001297 0.000000196 -0.000000801 -0.000002070 -0.000001906 0.000000735 0.000000212 -0.000000632 0.000000221 -0.000000766 0.000316908 -0.000403078 -0.000195266 -0.000633296 -0.000357964 -0.000000613 0.000186976 0.000134227 0.000325305 0.000038700 -0.000089196 0.000047461 -0.000019094 -0.000293727 -0.000008638 -0.000044689 0.000017646 0.000032014 0.000055990 0.000041920 -0.000083745 -0.000017786 -0.000028508 0.000053206 0.000071597 -0.000071914 0.000001348 0.000054507 0.000152815 0.000066555 -0.000184486 -0.000005640 -0.000000380 0.000040698 0.000095081 0.000136134 0.000021019 0.000003602 0.000055868 0.000039266 -0.000146188 -0.000101689 -0.000080782 -0.000211096 -0.000103338 -0.000121661 0.000012481 0.000033156 -0.000043058 0.000079385 -0.000096116 -0.000065821 0.000007803 0.000044665 0.000065329 0.000103576 -0.000100166 -0.000020957 -0.000065283 -0.000045907 0.000013989 0.000037664 0.000005590 -0.000042861 -0.000041727 0.000428866 0.000170741 0.000124258 0.000315127 -0.000089106 -0.000221739 -0.000080256 0.000049725 -0.000149928 0.000056684 0.000047269 0.000009293 -0.000021572 -0.000011565 -0.000001120 -0.000061049 -0.000055374 0.000032793 -0.000034847 -0.000009834 -0.000153041 0.000032682 -0.000006569 -0.000021261 0.000080918 -0.000106762 0.000022344 -0.000040893 -0.000049170 0.000048054 -0.000068206 -0.000040254 -0.000035448 -0.000076932 0.000015338 -0.000052862 0.000076018 -0.000052639 0.000066128 0.000011186 0.000047326 -0.000050984 0.000011137 0.000013309 -0.000023327 -0.000018962 0.000033769 -0.000007052 -0.000026559 0.000014635 -0.000057642 0.000013080 0.000016746 0.000064695 0.000039194 0.170601837 0.041190328 0.714137753 -0.011570214 0.024632809 0.721069108 0.006500699 0.009223287 0.124375258 0.173842869 -0.001955697 0.074087513 -0.035315526 0.030066329 0.714799027 0.000313759 0.000774319 0.004827900 0.000534560 0.003202040 -0.000766989 0.000108920 -0.001889635 0.003959183 -0.000220208 0.000158310 -0.000581767 -0.027928935 -0.006935655 -0.009520728 -0.000398133 -0.001982827 0.000362477 0.000164792 -0.000630683 0.005356592 -0.001299751 0.000218529 -0.000775062 -0.000075256 0.004481207 -0.010089178 -0.000769820 -0.000142159 -0.000717615 -0.050675337 -0.120264761 -0.002503319 -0.001560225 0.003391989 -0.052815887 -0.027790247 -0.001785199 0.006811105 0.000368003 -0.027977458 -0.130551116 0.003192628 0.000237255 -0.001145626 -0.002435909 -0.003653184 -0.268340090 -0.042891686 0.119731416 0.006679168 -0.001380222 -0.043414636 -0.047523787 0.020594783 -0.001134799 -0.001040347 0.119421897 0.020281559 -0.128207689 0.001671929 0.027742483 0.005718099 -0.001334766 -0.026975781 0.004921902 0.004877134 0.000272791 0.004084283 -0.007005868 -0.001396817 -0.009889961 0.003964800 0.000127114 -0.010078880 -0.000027213 -0.000132996 0.000289613 0.000043160 0.000211191 0.000029356 -0.000068894 0.000147858 0.000006570 0.000105649 -0.000020713 -0.000038990 0.000209071 0.000043922 0.000044492 0.000018027 0.000060996 -0.000116378 -0.000009571 -0.000111949 -0.000009851 0.000041026 -0.000072585 -0.000000581 -0.000098793 -0.000007672 0.000015222 0.000025844 -0.000001258 0.000032874 -0.000000008 0.000005196 -0.000017822 -0.000007328 0.000002256 0.000001642 0.000006035 -0.000014210 -0.000003215 -0.000006840 -0.000001168 0.000005907 -0.000007822 -0.000001716 -0.000006104 -0.000095929 -0.000725691 0.000041083 -0.000218195 -0.000431275 0.000453618 0.002989926 -0.000241298 0.001255899 -0.000080623 -0.000076075 0.000216165 -0.000138870 0.000451185 -0.000312140 -0.000423966 -0.001923623 -0.000798179 0.000088790 0.001607052 -0.000512739 -0.000803543 -0.000021832 -0.000455693 0.000295226 -0.000957280 -0.002448249 0.000004445 -0.001994943 0.000047648 0.000561065 0.001904775 0.000407926 0.000317171 -0.001301076 0.000028611 0.000829220 -0.000301400 0.000158731 -0.000729785 0.000599165 0.000969682 0.000133033 0.000319458 -0.000287991 0.000049244 -0.000115923 -0.000401618 -0.000219373 0.000389741 0.000203375 -0.000033409 0.000206637 -0.000078405 0.000157843 -0.000362386 -0.000133313 -0.000130750 -0.000091425 -0.000161630 -0.000001893 0.000005048 0.000087402 0.000038069 -0.000045572 0.000002470 0.000051122 -0.000022107 0.000020379 -0.000032320 0.000054903 0.000002593 0.000012186 0.000019861 0.000035273 -0.000177140 -0.000217740 -0.000058475 0.000005290 -0.000042061 0.000007892 -0.000037114 -0.000127651 -0.000015399 -0.000011550 0.000048200 0.000018429 -0.000056005 -0.000005968 -0.000048311 -0.000017671 -0.000039092 0.000091908 0.000019629 -0.000049398 -0.000031109 0.000045874 -0.000047552 0.000005655 -0.000043333 -0.000000766 0.000028246 -0.000002726 0.000018265 -0.000001363 -0.000176073 -0.000213549 0.000547463 -0.000447407 -0.000373235 0.000370867 -0.000443998 0.000531749 -0.000435552 0.000704393 0.000778807 0.000223631 -0.000112150 0.000958663 0.000932138 -0.000181355 0.000113633 0.000197396 -0.000106158 -0.000313560 -0.000173603 0.000249927 0.000340276 -0.001012566 -0.000027143 -0.000667436 -0.000825968 -0.000432377 0.000099469 -0.000384224 0.000004630 0.000004268 -0.000015383 -0.000007824 0.000014495 -0.000014068 -0.000007942 -0.000003585 -0.000006048 -0.000011070 0.000000115 0.000008238 -0.000004913 0.000003019 -0.000006223 0.000004353 0.000005985 0.000001407 0.000003869 -0.000004010 -0.000001124 0.000001900 0.000007873 0.000006606 -0.000008843 -0.000002353 -0.000013661 -0.000001899 -0.000008026 0.000010868 0.000002050 -0.000005027 0.000002385 -0.000000101 0.000001847 -0.000006716 -0.000001354 -0.000026888 -0.000013156 0.000008480 -0.000000388 -0.000001367 0.000023449 0.000004908 -0.000005408 0.000112916 0.000088779 0.000113039 0.000020562 0.000055669 -0.000049541 -0.000086110 0.000058642 0.000012622 0.000030889 0.000013690 0.000126166 0.000110303 0.000040651 0.000036197 -0.000004267 -0.000008673 0.000025105 0.000013582 0.000015063 -0.000029116 -0.000006698 -0.000047445 -0.000021487 -0.000001631 0.000012665 0.000040376 0.000054057 0.000014342 0.000026167 0.000036118 0.000033724 -0.000002997 -0.000010028 -0.000034139 -0.000011095 0.000006364 -0.000005948 0.000007750 -0.000004896 -0.000044305 0.000009691 -0.000069608 -0.000019898 0.000001816 0.000018900 0.000050150 -0.000030612 0.000007517 0.000004692 0.000082873 -0.000005461 0.000030989 -0.000000259 0.000036599 0.000038959 0.000001295 0.000019879 0.000011895 0.000025698 -0.000007718 0.000000136 0.000006591 -0.000003375 -0.000003987 -0.000018473 -0.000016727 0.000009659 0.000003866 -0.000015400 0.000015119 0.000015981 0.000000941 0.000009500 -0.000009603 0.000005541 -0.000008733 -0.000001222 0.000001710 0.000004616 -0.000004663 0.000014346 -0.000038213 0.000003086 0.000001060 -0.000001450 -0.000015693 -0.000006705 -0.000008407 0.000010955 0.000231685 -0.000146713 -0.000294203 0.000270636 -0.000012950 -0.000247166 0.000107336 -0.000404875 -0.001315258 -0.000174114 0.000270250 0.000329995 0.000297015 0.000358415 0.000239754 0.000085873 0.000030889 0.000111621 -0.000331755 -0.000020908 -0.000076137 -0.000062323 -0.000026321 0.000158659 -0.000096210 0.000044503 0.000157919 0.000003955 0.000032408 -0.000058666 0.000110385 0.000043471 -0.000122702 0.000005902 0.000061006 -0.000028670 -0.000013222 0.000142612 -0.000095203 -0.000037466 0.000049472 0.000044232 -0.000186017 0.000248383 0.000078330 0.000012690 0.000013013 -0.000002133 -0.000000524 0.000000030 0.000005555 -0.000012238 0.000010034 0.000001950 0.000002554 0.000005808 0.000057910 -0.000023953 -0.000008541 -0.000013584 0.000004333 0.000046238 -0.000015586 -0.000004513 -0.000002515 0.000018157 0.000068670 -0.000031845 -0.000007248 -0.000009107 -0.000004288 -0.000033639 -0.000000309 0.000000414 -0.000002471 -0.000005452 0.000031451 -0.000005576 -0.000002632 -0.000003520 0.000011055 0.000138465 -0.000031109 -0.000009200 -0.000011809 0.000011550 0.000083137 -0.000028098 -0.000007792 -0.000008073 0.000029963 -0.000095108 0.000025448 0.000003981 -0.000001658 0.000158118 0.000208643 -0.000054873 -0.000026684 -0.000022529 -0.000036158 -0.000353707 0.000072737 0.000021336 -0.000001253 0.000009943 -0.000018605 0.000002167 0.000002576 0.000001573 -0.000033437 -0.000158334 0.000054371 0.000014941 0.000020843 -0.000019295 -0.000066504 0.000020025 0.000005278 0.000004406 0.000000313 0.000037095 -0.000012911 -0.000006246 -0.000007291 0.000018338 0.000001604 -0.000000350 -0.000000595 0.000003170 -0.000024722 -0.000126664 0.000040007 0.000013104 0.000017510 0.000005344 0.000014035 -0.000010924 -0.000001589 -0.000005277 -0.000000798 0.000011899 -0.000003704 -0.000001270 -0.000002677 0.000002367 0.000007688 -0.000009309 -0.000001794 -0.000004337 0.000001157 -0.000014240 0.000015314 0.000004823 0.000003423 -0.000014038 0.000019024 -0.000008778 -0.000003787 -0.000002618 0.000032279 0.000065702 -0.000029918 -0.000006166 -0.000014255 -0.000451827 -0.001749516 0.000458463 0.000142256 0.000057930 -0.001235040 -0.000145654 0.000419830 0.000222071 0.000231737 -0.000503683 0.001232186 -0.000087657 0.000039587 0.000091460 0.000007079 -0.000040049 0.000011098 0.000004798 0.000007877 -0.000005951 -0.000056546 0.000014336 0.000002679 0.000003528 0.000005491 0.000009596 0.000001053 0.000000249 0.000001095 0.000008387 0.000009751 -0.000002184 0.000000309 0.000002245 0.000003882 0.000019820 -0.000006267 -0.000001756 -0.000001931 -0.000002847 -0.000011135 0.000003053 0.000000540 0.000000700 0.000001950 -0.000006286 0.000017627 0.000006799 0.000002271 -0.000004255 -0.000001357 0.000006172 0.000001568 -0.000002687 -0.000001232 -0.000003466 -0.000004242 -0.000002497 0.000003233 -0.000002365 0.000001928 -0.000007898 -0.000004382 0.000003746 -0.000000693 0.000004056 -0.000014308 -0.000004684 -0.000002768 0.000001138 0.000000623 -0.000006855 -0.000001781 -0.000001866 0.000002259 -0.000008543 0.000018098 0.000003775 0.000014468 0.000003547 -0.000008424 0.000020583 0.000009802 0.000000052 -0.000000098 -0.000000530 0.000005246 0.000002251 0.000000356 -0.000001305 0.000004211 -0.000006513 -0.000000297 -0.000010698 0.000000011 0.000002335 -0.000001355 -0.000000568 -0.000002036 0.000001432 -0.000001490 0.000000369 0.000000811 0.000000103 0.000002074 -0.000002822 0.000000523 0.000001455 -0.000000615 -0.000000071 -0.000004092 0.000010462 0.000000895 0.000012198 0.000000648 -0.000003457 0.000001920 0.000000304 0.000004828 -0.000001133 0.000002932 -0.000004309 -0.000001641 -0.000000660 0.000001805 -0.000002577 -0.000001527 -0.000001716 0.000006547 -0.000002425 0.000002686 0.000003052 0.000001260 -0.000003508 -0.000000837 0.000002359 0.000002519 0.000002251 -0.000006078 -0.000000959 -0.000000881 -0.000006224 -0.000002073 -0.000000926 -0.000000260 0.000003404 0.000009078 0.000004598 -0.000005933 -0.000013196 0.000023559 -0.000079432 -0.000027673 -0.000009019 -0.000004233 0.000024072 -0.000033779 -0.000000996 -0.000063805 -0.000001091 0.000014552 0.000051007 0.000017894 -0.000024635 0.000000216 0.000000672 -0.000003525 -0.000000523 -0.000002581 0.000000549 -0.000000497 -0.000002538 -0.000000011 -0.000001939 -0.000001980 0.000003008 0.000007421 -0.000000372 0.000005831 -0.000000120 0.000000577 0.000000844 0.000000296 -0.000000689 0.000000304 0.000000671 -0.000002825 -0.000000634 -0.000001302 -0.000000875 0.000004308 -0.000001190 -0.000000981 -0.000000365 -0.000443646 0.000913371 -0.000193253 -0.000004300 0.000042772 0.000564253 -0.000400999 -0.000090705 -0.000058264 -0.000052236 0.000408729 -0.000219244 -0.000066690 -0.000053914 -0.000071051 0.000849872 0.001082878 -0.000417572 -0.000204243 -0.000142532 0.000579641 -0.000089527 -0.000212606 -0.000098688 -0.000169189 -0.000159508 -0.000102905 -0.000078730 -0.000017856 -0.000046811 0.000006070 -0.000009994 0.000016775 0.000008844 -0.000002762 -0.000000158 -0.000012811 0.000008628 -0.000005549 0.000045554 0.000002810 -0.000011265 -0.000029114 -0.000008511 0.000012558 0.000007679 -0.000014346 0.000052673 0.000017681 0.000002990 0.000002551 -0.000006412 0.000019259 0.000002948 0.000020966 -0.000000123 -0.000008708 -0.000049868 -0.000016066 0.000010813 -0.000001744 0.000006994 -0.000001002 -0.000000415 -0.000000889 0.000000914 0.000007757 -0.000003318 -0.000000804 -0.000000861 -0.000000888 0.000000940 0.000001653 -0.000000183 0.000000373 0.000004771 -0.000000487 -0.000004103 -0.000000419 0.000001021 0.000002104 0.000009470 -0.000007820 -0.000001919 -0.000001999 -0.000002203 -0.000005748 0.000006232 0.000001328 0.000001011 0.000000658 -0.000014756 0.000004554 0.000001711 0.000002520 0.000000328 0.000003234 -0.000000472 -0.000000169 -0.000000294 0.000000675 -0.000010225 0.000002585 0.000001290 0.000001836 -0.000000963 0.000001719 -0.000000463 -0.000000205 -0.000000722 0.000000336 0.000004606 -0.000001637 -0.000000338 -0.000000746 -0.000000607 -0.000010509 0.000004515 0.000001298 0.000002396 -0.000000644 -0.000001891 0.000001133 0.000000256 0.000000382 -0.000000206 -0.000001751 0.000000092 0.000000028 0.000000047 -0.000000635 0.000003388 -0.000000333 -0.000000395 -0.000000794 -0.000000434 0.000004373 -0.000000326 -0.000000254 -0.000000925 -0.000000345 0.000001525 -0.000000420 -0.000000261 -0.000000488 -0.000000064 -0.000001920 0.000000451 0.000000125 0.000000095 -0.000002176 0.000005906 0.000000035 -0.000000446 -0.000001493 -0.000000523 -0.000004270 0.000002715 0.000000690 0.000000953 0.000001427 0.000008106 -0.000004695 -0.000000991 -0.000000962 0.000000954 0.000009626 -0.000004204 -0.000000967 -0.000001654 0.000000664 0.000004663 -0.000001484 -0.000000253 -0.000000212 -0.000000231 -0.000003504 0.000001243 0.000000280 0.000000268 0.000000502 -0.000001147 -0.000000583 -0.000000106 0.000000518 0.000000215 0.000000862 -0.000001210 -0.000000284 -0.000000472 -0.000001271 -0.000003286 0.000002579 0.000000439 0.000000225 -0.000000004 0.000001613 -0.000000698 -0.000000213 -0.000000430 -0.000000370 0.000002313 -0.000000705 -0.000000429 -0.000000871 0.000000118 -0.000003397 0.000000611 0.000000351 0.000000828 -0.000001522 -0.000009821 0.000007239 0.000001556 0.000002819 -0.000000202 -0.000013165 0.000004100 0.000000554 0.000001274 -0.000001301 -0.000007611 0.000003886 0.000000643 0.000001140 0.000000002 -0.000004302 0.000000273 0.000000093 0.000000550 -0.000000287 0.000000735 0.000001044 -0.000000460 0.000001160 0.000000147 -0.000002321 0.000002831 0.000000823 0.000001027 0.000000621 0.000004050 -0.000003622 -0.000000935 -0.000001185 -0.000000068 0.000006006 -0.000000617 -0.000000057 -0.000000159 0.000002190 0.000002623 -0.000003339 -0.000000711 0.000000758 -0.000000320 0.000000324 -0.000000060 0.000000010 -0.000000465 0.000000001 -0.000002268 0.000003810 0.000000814 0.000001337 0.000001196 -0.000000411 -0.000000540 -0.000000045 0.000000823 0.000000877 -0.000002037 0.000000991 0.000000238 0.000001243 -0.000000538 -0.000005798 0.000001985 0.000000440 0.000000521 -0.000001004 -0.000001077 0.000001600 0.000000481 -0.000000235 0.000000530 0.000001303 0.000000400 0.000000394 0.000000413 -0.000000030 0.000000236 0.000001142 0.000000557 0.000000415 -0.000000679 0.000001356 0.000000566 0.000000190 -0.000000634 -0.000001428 0.000002137 0.000002878 0.000000930 -0.000000895 0.000000963 0.000000837 -0.000002883 -0.000000719 0.000000041 0.000000094 0.000000621 0.000001710 0.000000670 0.000000595 -0.000001050 -0.000001313 0.000003494 0.000000787 0.000000192 0.000000246 -0.000000673 0.000001899 0.000000555 0.000001592 0.000000330 -0.000001120 0.000001709 0.000000467 0.000001050 0.000000388 -0.000002515 -0.000000247 -0.000000243 0.000000715 0.000000258 0.000000232 -0.000001343 -0.000000344 -0.000000104 -0.000000766 -0.000001502 0.000000941 0.000000144 -0.000000359 0.000000445 -0.000000831 -0.000000146 0.000000013 0.000000408 -0.000000159 0.000003179 0.000000665 0.000000365 -0.000000314 -0.000000665 -0.000000589 0.000000382 -0.000000040 -0.000000447 -0.000099788 0.000476011 -0.000350281 -0.000290216 -0.000282168 0.000014206 -0.000341583 0.000124518 0.000019686 0.000080480 -0.000009203 0.000122271 0.000130124 0.000007042 0.000002665 -0.000015163 -0.000022313 0.000021005 -0.000046547 0.000015649 0.000017318 -0.000016477 -0.000013032 -0.000047192 0.000017365 0.000007843 -0.000041776 0.000011294 0.000052062 0.000069654 0.000011388 0.000020320 0.000254077 -0.000008620 -0.000063641 -0.000012671 -0.000050158 -0.000079320 0.000034708 0.000042496 -0.000000908 0.000159163 -0.000053582 -0.000182355 -0.000222511 -0.000012367 0.000034299 0.000068241 -0.000008641 0.000037680 0.000009668 0.000027784 0.000073949 -0.000003860 0.000025998 -0.000005585 0.000096173 -0.000153787 -0.000138610 -0.000096208 0.000006188 0.000127070 0.000032145 -0.000007540 0.000000096 0.000069185 -0.000180458 0.000100958 0.000064040 -0.000217882 -0.000000160 0.000019077 0.000010980 0.000001908 0.000118641 0.000009353 -0.000019399 -0.000006325 0.000011266 -0.000041678 0.000001166 0.000018803 0.000011242 0.000006244 0.000029935 -0.000035123 0.000012660 -0.000059469 -0.000052106 0.000060052 0.000008925 -0.000024432 -0.000006010 -0.000005123 0.000034467 0.000002618 0.000033513 0.000009748 0.000002312 0.000006084 -0.000027677 -0.000068784 -0.000017741 -0.000018830 0.000037656 0.000007202 0.000013842 0.000004619 0.000018099 0.000002041 -0.000001543 -0.000005861 -0.000005906 -0.000013282 -0.000008880 0.000003672 -0.000019129 0.000008573 -0.000011510 0.000030947 0.270328875 0.062154337 0.042477186 0.127000950 0.035503400 0.136024348 -0.000783769 -0.000220708 0.000692161 0.292997552 -0.000308613 0.000330566 0.000178705 0.041001621 0.032221770 -0.000813013 -0.000206455 0.000390200 -0.125846699 -0.013731485 -0.000036751 0.000160938 -0.000062706 0.000541261 0.000864476 0.000203692 -0.000940063 0.000044999 0.000958322 -0.004274630 -0.000073038 0.000036872 0.000028557 -0.000169187 0.000323744 0.000447703 0.001077322 0.000146006 -0.000060632 0.000228027 0.001015688 -0.004097114 0.000363388 0.000180070 -0.000986363 -0.000306535 0.000317676 0.001031107 0.000059573 0.000085829 0.000111212 -0.000100236 -0.001234832 0.000038279 0.000145707 0.000011096 -0.000032848 -0.000344114 0.000026775 -0.000108750 0.000174514 -0.000011425 -0.000550450 -0.000154194 -0.000071564 0.000119785 0.000075752 -0.000088740 -0.000296648 -0.000077767 0.000047856 0.000025202 -0.000031858 -0.000133980 -0.000216103 0.000067823 0.000043081 -0.000028870 -0.000108032 0.000255852 -0.000037454 -0.000039221 0.000038354 0.000162792 0.000110235 -0.000026952 -0.000021885 0.000027149 0.000109368 0.000186275 0.000004644 0.000010972 -0.000013784 -0.000022933 -0.000027345 -0.000009121 -0.000003742 0.000005254 0.000013322 0.000004630 -0.000006011 -0.000003623 0.000004065 0.000013183 0.000002465 -0.000003461 -0.000001214 0.000000954 0.000003531 0.000008314 -0.000099945 -0.000046605 0.000126609 0.000076642 0.000124920 0.000079436 -0.000872246 -0.000300899 -0.000255562 -0.000845213 0.000249631 -0.000586381 0.000033807 -0.000157184 -0.000179731 -0.000568658 -0.000675021 -0.000181267 -0.000795450 0.001000104 -0.000559688 0.000216717 0.000342027 -0.000068921 0.001006618 -0.000051933 0.001617949 0.000577207 0.000333207 0.001166890 0.000560446 0.000185596 -0.000171362 0.000373266 -0.001448522 0.000282269 0.000041926 -0.000172087 -0.000296002 -0.000607364 0.000141038 -0.000098719 -0.000138054 0.000133000 -0.000413822 -0.000309952 -0.000058760 0.000134152 0.000280739 0.001234837 -0.000005353 -0.000023223 0.000062994 0.000720950 -0.000672621 -0.000063700 0.000003355 0.000006058 -0.000237334 0.000253654 0.000056341 0.000009808 -0.000022469 -0.000058310 -0.000257020 0.000008809 0.000002193 -0.000013779 -0.000047436 0.000114776 0.000011823 -0.000002250 -0.000000736 0.000014880 -0.000069082 0.000002235 0.000018741 -0.000013108 -0.001346042 -0.000512488 -0.000056910 0.000005412 0.000014161 -0.000828882 -0.000596403 -0.000001593 -0.000003737 0.000001485 0.000228980 0.000403725 0.000046775 0.000014822 -0.000015247 -0.000036945 -0.000197257 -0.000002075 0.000005927 -0.000005144 -0.000053613 0.000154798 0.000008585 0.000000062 -0.000006177 -0.000013925 0.000019835 0.000124812 0.000481426 0.000396780 0.000330932 0.000045970 0.000713514 0.000172823 0.000275257 0.000034572 -0.000142241 0.000140925 -0.000742924 -0.000387917 -0.000367252 -0.000248789 -0.000046774 -0.000180464 -0.000149231 0.000004781 0.000017470 -0.000136635 -0.000152295 -0.000045152 0.000032765 0.000040763 -0.000405332 -0.000191665 0.000033365 0.000102985 0.000082121 -0.000007959 -0.000001302 0.000004958 0.000012490 0.000006987 -0.000002754 -0.000000222 0.000003538 0.000003373 0.000001169 0.000000039 0.000001065 -0.000002352 -0.000009978 0.000034153 0.000002476 -0.000000119 -0.000001760 -0.000001439 -0.000000313 0.000007242 0.000001709 -0.000004053 -0.000009098 -0.000011575 -0.000008782 -0.000001106 0.000003484 0.000007609 0.000027231 0.000000580 -0.000000341 0.000000815 0.000008454 -0.000003266 -0.000014807 -0.000001347 0.000006127 0.000010621 0.000060406 0.000011822 0.000002235 -0.000002729 -0.000006362 -0.000078936 0.000034522 0.000000547 -0.000004044 0.000071633 -0.000713775 0.000024776 0.000004134 -0.000011152 -0.000722613 -0.000884566 0.000049974 -0.000000074 -0.000015895 0.000365274 -0.000084771 0.000009057 0.000001060 -0.000003672 0.000024805 -0.000122648 -0.000026797 -0.000001078 0.000009369 -0.000278998 0.000139275 0.000015349 0.000001790 -0.000006370 0.000123606 -0.000070496 0.000001811 -0.000007303 0.000006933 0.000113796 -0.000083789 0.000000598 -0.000004294 -0.000000698 -0.000175612 -0.000020864 -0.000042066 -0.000004875 0.000014084 0.000068073 0.000096285 -0.000005291 -0.000006079 0.000000305 0.000012012 0.000016732 0.000006860 0.000000022 0.000001770 0.000018445 -0.000040276 0.000007086 -0.000001932 -0.000000551 0.000022060 -0.000050864 0.000001305 0.000002901 -0.000000242 -0.000000441 0.000003138 0.000006847 0.000001768 -0.000003561 -0.000020015 -0.000011919 0.000007426 0.000000483 -0.000003327 -0.000002786 -0.000029322 -0.000000718 -0.000000957 0.000000964 0.000001465 -0.000004915 -0.000012956 -0.000006949 0.000000126 -0.000008232 0.000066036 -0.000007022 0.000000395 0.000003334 0.000002861 0.000044955 0.000029783 -0.000013353 0.000019435 -0.000020181 0.000011808 0.000053220 0.000024269 0.000035344 -0.000058721 0.000068726 0.000062694 0.000011693 -0.000030804 0.000002306 -0.000033322 -0.000014930 0.000034349 0.000010287 0.000024133 -0.000019576 0.000000525 -0.000046192 -0.000040391 -0.000015286 -0.000001263 0.000023245 -0.000039659 -0.000043495 -0.000007864 -0.000019233 0.000019594 0.000057737 0.000029284 -0.000017785 0.000022313 0.000041544 0.000001938 -0.000002954 0.000004298 -0.000018274 0.000076165 -0.000015946 -0.000011473 -0.000022839 -0.000004243 -0.000000348 -0.000001271 0.000000791 0.000003622 -0.000012762 0.000005649 0.000000865 0.000001416 0.000000962 0.000008118 -0.000010983 -0.000001707 -0.000001285 0.000033946 0.000024957 -0.000006447 -0.000000509 -0.000001720 0.000041868 -0.000026619 -0.000013116 -0.000004939 -0.000000313 0.000037244 -0.000075847 -0.000000466 0.000000469 0.000003022 0.000024695 0.000032029 -0.000000300 0.000001319 -0.000002195 -0.000011583 0.000010355 -0.000008901 -0.000001541 -0.000002881 0.000011868 0.000096665 -0.000010548 -0.000002386 -0.000002397 0.000037972 -0.000007012 -0.000000182 -0.000001835 -0.000003502 0.000104702 -0.000021033 -0.000014408 -0.000004715 -0.000002445 0.000015236 -0.000085286 0.000025621 0.000006973 0.000006433 -0.000063349 0.000101617 0.000001775 0.000001331 -0.000000897 -0.000040787 0.000025431 0.000019772 0.000005076 0.000000032 -0.000105619 0.000005612 0.000005467 0.000001022 0.000000249 -0.000020397 0.000005161 -0.000004902 -0.000000284 -0.000000438 0.000017887 0.000004209 -0.000001006 -0.000001298 0.000001335 0.000034979 -0.000032684 0.000016446 0.000005217 0.000000638 -0.000082072 0.000030543 -0.000004281 -0.000003618 0.000002965 0.000022255 -0.000008499 -0.000001372 0.000000393 -0.000000189 0.000003543 0.000010267 -0.000004409 -0.000002435 0.000001863 0.000016487 -0.000005939 0.000008551 0.000000110 -0.000000735 -0.000111566 0.000135655 -0.000005296 0.000002058 -0.000000037 0.000098526 0.000001283 -0.000012071 -0.000005309 0.000002820 0.000087265 -0.000065166 0.000140853 0.000026279 0.000014008 -0.000895723 -0.000027005 0.000157160 0.000063576 -0.000056785 -0.001730625 0.001796028 -0.000029336 -0.000006287 -0.000059726 -0.000414373 0.000183028 0.000004476 0.000000035 0.000001638 -0.000006650 -0.000011558 0.000004998 0.000001903 0.000000869 -0.000022827 0.000017150 -0.000000702 -0.000001184 -0.000000107 0.000012192 -0.000022830 -0.000000469 -0.000001052 0.000000554 0.000010467 -0.000013110 -0.000002232 -0.000000512 -0.000000434 0.000012138 -0.000005622 0.000000474 -0.000000069 0.000000188 -0.000003656 0.000000259 0.000009245 0.000004295 -0.000004442 -0.000009754 -0.000007558 0.000003021 0.000002103 -0.000002110 -0.000008483 0.000005983 -0.000002720 -0.000001116 0.000002763 0.000002206 0.000001645 -0.000004138 -0.000001806 0.000001809 0.000000977 0.000005153 -0.000006642 -0.000003421 0.000003770 0.000008183 0.000005830 -0.000002949 -0.000000621 0.000002575 0.000005278 0.000000597 0.000008649 0.000004358 -0.000004281 -0.000009451 -0.000011992 0.000010926 0.000003379 -0.000004997 -0.000011359 -0.000010442 0.000002844 0.000000959 -0.000001886 -0.000004093 -0.000000893 -0.000002759 -0.000001322 0.000001323 0.000003135 0.000007889 -0.000000352 0.000000320 -0.000000672 0.000001524 0.000001805 0.000000956 -0.000000395 0.000000199 0.000000540 -0.000001563 0.000000966 -0.000000690 0.000000563 0.000001208 -0.000003826 0.000004096 0.000002663 -0.000002818 -0.000007415 -0.000005373 0.000000667 -0.000000013 0.000000388 -0.000000716 -0.000002905 -0.000001925 -0.000000815 0.000000398 0.000001420 0.000003989 -0.000001170 -0.000000355 0.000001541 0.000003427 -0.000004739 0.000001667 0.000001048 -0.000002268 -0.000004858 0.000004856 0.000001245 -0.000001408 -0.000001951 -0.000004524 0.000000455 -0.000003350 -0.000001611 0.000003072 0.000002807 0.000002793 0.000004952 0.000002231 -0.000004525 -0.000006048 -0.000000335 -0.000045683 -0.000024506 0.000026087 0.000025469 0.000033026 -0.000012969 0.000000981 0.000002737 0.000025516 0.000039565 0.000028817 0.000024295 -0.000027735 -0.000022416 0.000003092 -0.000001475 -0.000001058 0.000000928 0.000001844 0.000000570 -0.000000578 -0.000000730 0.000001028 0.000001502 0.000000518 0.000002233 0.000002935 -0.000003520 -0.000006474 -0.000001696 0.000000419 0.000000353 -0.000000461 -0.000000157 0.000000287 -0.000001143 -0.000000637 0.000000935 0.000002670 0.000001124 -0.000000717 0.000000349 -0.000000809 0.000000002 0.000002100 -0.000040809 -0.000008277 -0.000036264 -0.000034176 0.000269678 -0.000037233 -0.000021664 0.000019547 0.000489056 -0.000827387 0.000002944 -0.000004603 0.000034372 0.000320313 -0.000449108 -0.000127170 -0.000040283 0.000014307 0.000027695 -0.000472763 -0.000076897 -0.000034778 0.000031043 0.000921300 -0.001078541 -0.000019956 -0.000010144 0.000028614 0.000053622 -0.000070707 0.000011414 0.000004117 -0.000004342 -0.000000978 -0.000008186 -0.000000493 -0.000006710 0.000003484 -0.000013250 -0.000023295 -0.000015528 -0.000015646 0.000016152 0.000012846 -0.000005319 0.000029010 0.000019380 -0.000017238 -0.000013100 -0.000016658 0.000010062 0.000001400 -0.000006027 -0.000011445 -0.000015311 -0.000028339 -0.000020562 0.000025799 0.000025414 0.000005956 -0.000000215 0.000001070 -0.000001307 -0.000001312 0.000006215 -0.000001558 -0.000000283 -0.000000110 0.000004438 0.000000527 0.000000546 0.000000803 -0.000000647 -0.000001065 0.000000502 -0.000001799 -0.000002490 0.000002782 0.000010582 -0.000011878 -0.000003464 -0.000001692 0.000001195 0.000009641 -0.000000109 0.000002825 0.000001770 -0.000001313 -0.000007552 0.000001338 0.000002143 -0.000000398 0.000001303 -0.000005465 -0.000004329 0.000000012 0.000000004 -0.000000247 0.000001160 -0.000000701 0.000001145 -0.000000529 0.000000956 -0.000003873 -0.000002471 -0.000000027 0.000000329 -0.000000457 -0.000001423 0.000003427 -0.000000682 -0.000000133 -0.000000343 0.000001939 0.000000728 0.000001983 0.000000369 0.000000377 -0.000005943 -0.000001277 0.000000626 0.000000295 -0.000000125 -0.000002261 0.000001074 0.000000021 -0.000000036 0.000000258 -0.000000469 0.000000261 -0.000000207 0.000000443 -0.000000579 0.000000559 0.000001603 -0.000000051 0.000000452 -0.000000769 0.000000555 0.000001407 -0.000000184 0.000000192 -0.000000163 0.000000466 0.000000868 0.000000149 -0.000000041 0.000000144 -0.000000700 -0.000000156 -0.000000001 0.000001206 -0.000001652 -0.000002064 0.000006299 0.000001227 0.000000375 -0.000000289 -0.000003725 -0.000000065 -0.000002096 -0.000000871 0.000000291 0.000006269 -0.000000666 -0.000001798 -0.000000377 -0.000000177 0.000005952 0.000000422 -0.000000623 -0.000000135 -0.000000194 0.000002678 -0.000000495 0.000000509 -0.000000069 0.000000037 -0.000002220 -0.000000065 -0.000000385 -0.000000409 0.000000532 0.000000965 -0.000001144 -0.000000527 -0.000000236 0.000000334 0.000001486 -0.000000042 0.000001119 0.000000727 -0.000000471 -0.000003734 0.000001462 -0.000000293 -0.000000058 -0.000000113 0.000000657 0.000000513 -0.000000378 0.000000163 -0.000000267 0.000000819 0.000001097 0.000000270 -0.000000123 0.000000483 -0.000000975 -0.000000676 0.000003061 0.000001499 -0.000000902 -0.000008440 -0.000000399 0.000001581 -0.000000200 0.000001581 -0.000002398 -0.000005062 0.000001722 0.000000613 -0.000000024 -0.000005455 -0.000000152 0.000000191 -0.000000164 0.000001001 -0.000000595 -0.000000578 -0.000000015 0.000000352 -0.000000738 -0.000000637 -0.000000276 0.000001417 0.000000476 -0.000000404 -0.000002168 -0.000001452 -0.000001764 -0.000000676 0.000000696 0.000004499 0.000000149 -0.000000283 0.000000475 -0.000001175 0.000000510 0.000001741 -0.000001805 -0.000001080 0.000001029 0.000005593 -0.000003295 0.000000038 0.000000078 -0.000000201 -0.000000353 0.000000798 0.000001383 0.000000697 -0.000001049 -0.000002481 -0.000001701 -0.000000317 -0.000000575 0.000000321 0.000001448 -0.000002353 0.000000329 -0.000000131 0.000000183 0.000000097 -0.000002611 0.000000961 0.000000101 0.000000408 -0.000002701 -0.000000614 0.000000827 0.000000651 -0.000000473 -0.000002458 0.000001708 0.000000274 0.000000078 -0.000000377 -0.000000035 -0.000000503 0.000000746 0.000000426 -0.000000457 -0.000001518 0.000000336 0.000000335 0.000000508 -0.000000543 -0.000000905 0.000001539 0.000001681 0.000001177 -0.000001855 -0.000004135 0.000002702 -0.000001576 -0.000000739 0.000001131 0.000003993 -0.000001180 0.000000959 0.000000249 -0.000000968 -0.000001861 -0.000000350 0.000001586 0.000001129 -0.000001023 -0.000003428 0.000000817 0.000000841 0.000000498 -0.000000617 -0.000002040 -0.000000576 0.000000637 0.000000115 -0.000000397 -0.000001006 -0.000001296 -0.000000305 -0.000000432 0.000000702 0.000000608 -0.000001433 -0.000000517 -0.000000370 0.000000459 0.000000980 -0.000000081 0.000000479 0.000000518 0.000000043 -0.000001360 0.000000988 -0.000000112 -0.000000349 0.000000179 0.000000352 -0.000001008 0.000000332 0.000000445 -0.000001021 -0.000000496 0.000001019 0.000000186 0.000000300 -0.000000074 -0.000000828 0.000000967 -0.000452218 -0.000002187 -0.000083983 -0.000048785 -0.000041622 0.000154887 -0.000238954 0.000215545 -0.000014701 -0.000025679 -0.000115848 0.000359129 -0.000372537 0.000035417 0.000017542 -0.000003474 0.000088967 -0.000011159 0.000008783 0.000008289 -0.000038064 0.000061122 -0.000022353 0.000015346 0.000014507 0.000033373 -0.000150566 -0.000018047 0.000000154 -0.000001882 0.000382389 0.000506018 -0.000334658 0.000036375 0.000022119 0.000138189 -0.000171820 0.000463919 -0.000005012 0.000023037 -0.000268043 0.000546191 -0.000282808 0.000006819 -0.000015013 0.000085971 0.000089932 -0.000060743 0.000029000 0.000032043 0.000101904 0.000080688 -0.000056878 0.000008360 0.000013353 -0.000193111 -0.000014923 0.000016795 0.000002008 -0.000013866 -0.000012793 0.000083929 -0.000074144 0.000005658 -0.000018734 0.000026212 -0.000081602 0.000011135 0.000045691 -0.000104301 0.000006535 0.000072176 -0.000031563 -0.000027001 0.000010967 0.000004023 -0.000014718 0.000005112 0.000017591 -0.000003920 0.000013480 0.000005716 -0.000003275 -0.000017450 -0.000001836 -0.000020934 0.000038837 0.000003140 -0.000003372 0.000051754 -0.000000486 0.000010897 0.000004986 0.000023226 0.000012799 0.000001000 0.000014993 -0.000004553 0.000037156 0.000035700 -0.000014465 0.000005148 0.000011812 -0.000056922 0.000048720 0.000004355 -0.000021799 0.000003902 0.000003921 -0.000038722 0.000000584 0.000012080 0.000004936 0.000005077 0.000004849 0.000002611 0.000017767 -0.000007842 0.000005938 0.000003593 0.129451428 -0.000016402 0.278096189 0.000333546 0.055076029 0.041461524 0.001030596 0.126329841 0.029835532 0.134892256 0.000057932 -0.000706328 -0.000109087 0.000752090 0.280741450 0.000087628 -0.000229145 0.000017652 0.000230319 0.047901403 0.000038673 -0.000645521 -0.000093436 0.000443194 -0.128401752 0.001282041 0.000850829 0.000986894 -0.000624231 0.000731960 0.000236150 0.000871272 -0.003986174 0.000121940 0.001097455 -0.000562678 -0.000103038 0.000277350 0.000655677 -0.000136792 -0.000254215 -0.000151299 0.000008645 0.000170061 -0.000019404 0.000035488 -0.000049447 -0.000028831 0.000074422 -0.000002448 0.000314511 -0.000057064 0.000007215 0.000082801 0.000014785 0.000223244 0.000080088 0.000002448 -0.000073102 0.000019325 0.000169923 0.000042846 0.000020555 -0.000053671 0.000012169 -0.000060695 0.000000834 -0.000002911 0.000001549 -0.000012077 0.000013758 0.000010394 -0.000000496 -0.000009176 0.000002632 0.000014291 0.000009533 0.000000286 -0.000008088 0.000001682 0.000004966 0.000004750 0.000001993 -0.000005882 -0.000000635 0.000066884 -0.000018609 0.000007922 -0.000009828 0.000014446 -0.000403877 0.000050372 -0.000082893 0.000231607 -0.000135339 -0.000188037 0.000018774 -0.000053247 0.000136952 -0.000087177 0.000100209 0.000047832 0.000156147 -0.000191967 -0.000039600 0.000301758 -0.000016165 0.000114906 -0.000337059 0.000100350 0.000519306 -0.000151918 0.000157831 -0.000372797 0.000268600 -0.000385054 -0.000075715 -0.000179998 0.000435601 -0.000048504 -0.000252353 -0.000073458 -0.000073342 0.000225537 -0.000063133 -0.000187957 0.000110621 -0.000116122 0.000123694 -0.000045362 0.000275073 0.000240234 0.000097151 -0.000444866 0.000016711 0.000180444 0.000009208 0.000022136 0.000020763 0.000093710 0.000041268 -0.000197251 0.000201149 -0.000094172 -0.000013315 -0.000069265 -0.000044799 -0.000017229 0.000083391 -0.000000002 -0.000025576 0.000019442 -0.000012114 -0.000011089 -0.000018595 -0.000005271 0.000035711 -0.000045599 0.000019909 0.000003030 0.000435537 -0.000131634 0.000015796 0.000078567 -0.000013119 0.000588971 0.000064935 -0.000058623 -0.000006982 -0.000023554 0.000241244 0.000029239 0.000023805 -0.000050222 -0.000001028 -0.000010813 -0.000052296 -0.000017520 0.000071787 0.000005850 -0.000036024 0.000012203 0.000000751 -0.000038609 -0.000019188 0.000000166 0.000005182 -0.000002587 -0.000014993 -0.000009911 0.000131466 -0.000044032 -0.000004379 -0.000054835 0.000108227 -0.000029388 0.000018786 -0.000099450 0.000052924 -0.000024194 -0.000191381 0.000189033 -0.000105145 0.000142783 -0.000197379 -0.000010033 -0.000055998 0.000038574 -0.000006610 -0.000107223 0.000022137 0.000017202 0.000022467 -0.000041897 0.000073470 0.000057081 -0.000121194 0.000117083 -0.000077900 0.000142759 0.000009086 0.000014791 -0.000005664 -0.000009365 0.000002594 0.000008945 -0.000013762 0.000011641 -0.000000446 0.000002881 -0.000004901 0.000004348 -0.000001778 -0.000004010 -0.000004098 -0.000000883 0.000002365 -0.000001979 0.000000473 -0.000001408 -0.000012401 -0.000006640 -0.000001026 0.000008190 -0.000001701 0.000011845 -0.000000018 0.000008286 -0.000010726 0.000001417 -0.000002203 -0.000001526 -0.000001039 0.000002684 0.000001275 0.000015680 0.000008395 0.000006176 -0.000020463 0.000000813 -0.000013498 -0.000010293 -0.000004384 0.000020843 0.000002842 -0.000101194 0.000101570 -0.000069731 0.000054755 0.000013195 -0.000024361 0.000016954 0.000072252 -0.000007483 0.000007195 -0.000112403 -0.000082868 0.000019822 -0.000016719 0.000004422 0.000003134 0.000008782 -0.000006308 0.000007741 -0.000000748 0.000047723 -0.000011527 -0.000003660 -0.000005493 -0.000002072 -0.000219878 0.000014989 -0.000020744 0.000033263 0.000001239 0.000157793 0.000016114 0.000000678 -0.000024606 0.000006623 0.000206115 0.000004814 -0.000004601 -0.000024048 -0.000001601 -0.000374864 -0.000000339 -0.000026044 0.000028440 -0.000006986 0.000027265 0.000019099 0.000013598 -0.000020610 -0.000005178 -0.000015496 0.000034630 -0.000040826 0.000035221 0.000009990 -0.000022276 0.000017830 -0.000029967 0.000030153 0.000005110 -0.000003747 -0.000002439 0.000002384 -0.000001826 -0.000000457 -0.000007614 -0.000026162 0.000006618 0.000009499 -0.000000517 -0.000000530 0.000008680 -0.000008691 0.000013418 -0.000000691 -0.000000322 -0.000002854 -0.000002056 0.000003717 0.000002134 0.000008706 0.000002409 0.000015327 -0.000024729 -0.000006119 -0.000022660 0.000010967 -0.000013571 0.000001355 0.000002575 0.000013603 -0.000032447 0.000008873 -0.000010733 -0.000061317 0.000031758 -0.000052193 0.000089623 -0.000018032 0.000019079 -0.000032771 -0.000008445 0.000002255 0.000009678 0.000001946 -0.000005790 0.000016427 -0.000013826 0.000004600 0.000084331 0.000001397 -0.000017955 0.000004498 0.000009551 -0.000063080 -0.000015087 0.000012768 -0.000010344 0.000011061 0.000020023 0.000009928 0.000005782 0.000009132 -0.000004752 0.000025586 -0.000015588 0.000003675 -0.000013785 0.000007796 -0.000007134 0.000001029 -0.000001460 0.000000927 0.000013743 -0.000029909 0.000021098 0.000017938 -0.000009132 -0.000005587 0.000000219 -0.000008884 -0.000029949 -0.000020969 0.000002760 0.000005208 0.000047192 0.000039900 -0.000007208 -0.000045958 -0.000008075 0.000030802 0.000041883 0.000018866 -0.000038145 -0.000007972 0.000076906 0.000084863 0.000000741 -0.000056563 -0.000010652 -0.000038239 -0.000057868 -0.000023818 0.000006717 0.000003627 -0.000024593 0.000009330 0.000001799 0.000003321 -0.000003028 0.000107660 0.000135152 0.000032602 -0.000082065 -0.000012065 0.000076209 0.000071920 -0.000002766 -0.000063718 -0.000011845 0.000039678 0.000202052 -0.000076241 0.000196983 0.000001655 0.000178519 -0.000002272 -0.000322662 -0.000267908 -0.000016652 -0.000137195 -0.000167889 -0.000119960 0.000171378 0.000032478 -0.000023042 0.000000267 -0.000010727 0.000029173 -0.000000796 -0.000162212 -0.000115680 0.000015686 0.000115878 0.000016226 -0.000028293 -0.000080304 0.000035866 0.000054158 0.000006855 0.000022319 0.000017103 -0.000008512 -0.000042807 -0.000004561 0.000000484 0.000009780 -0.000032426 0.000000180 0.000001068 -0.000131361 -0.000107185 0.000010577 0.000093608 0.000012360 0.000026433 0.000021823 0.000000521 -0.000011744 0.000000910 0.000006931 0.000010571 0.000002623 -0.000005430 -0.000001395 0.000013076 0.000008977 -0.000001456 -0.000008326 -0.000000111 -0.000017378 -0.000003869 0.000002274 0.000011945 0.000006088 -0.000012264 0.000010991 0.000007675 -0.000011382 -0.000004021 0.000089688 0.000070333 -0.000028073 -0.000045955 -0.000005435 -0.001304057 -0.002159235 0.000048862 0.001896854 0.000168021 -0.002379131 -0.000053357 0.003693825 0.001411279 0.000051746 -0.000241088 0.001803610 0.002165200 -0.000010632 -0.000112731 -0.000032234 -0.000031559 -0.000017369 0.000026583 0.000005806 -0.000040641 -0.000068670 -0.000009499 0.000029150 0.000005470 0.000005161 0.000015655 -0.000000290 0.000000235 0.000000495 0.000007599 0.000012901 -0.000007791 -0.000006072 0.000000042 0.000015756 0.000019018 -0.000002023 -0.000013155 -0.000002632 -0.000008664 -0.000011226 0.000004304 0.000008063 0.000001481 -0.000010818 -0.000008329 -0.000000725 0.000008723 -0.000001440 -0.000006229 -0.000007042 0.000003056 0.000002715 -0.000001502 0.000002288 -0.000000889 0.000000063 -0.000000210 0.000001740 0.000002628 0.000002224 0.000000351 -0.000003202 0.000001053 0.000008252 0.000006690 0.000000085 -0.000006803 0.000001506 0.000004360 0.000002949 -0.000000660 -0.000002275 0.000001493 -0.000011455 -0.000007887 -0.000002997 0.000009661 -0.000000168 -0.000012246 -0.000010396 -0.000001001 0.000010867 -0.000001555 -0.000003010 -0.000002468 0.000000535 0.000002045 -0.000001072 0.000004389 0.000002571 0.000002537 -0.000004426 -0.000000702 0.000000743 0.000001954 0.000000291 -0.000001803 -0.000000772 -0.000000050 -0.000000248 -0.000000838 0.000000981 0.000000776 -0.000000077 -0.000000948 -0.000001402 0.000001612 0.000000925 -0.000008414 -0.000004508 -0.000001900 0.000005387 -0.000000457 -0.000000940 -0.000001853 -0.000001092 0.000002212 0.000000939 0.000002753 0.000002407 0.000000740 -0.000003006 -0.000000075 0.000002142 0.000001648 -0.000002097 0.000000352 0.000001684 -0.000003200 -0.000001928 0.000001945 -0.000000121 -0.000001939 -0.000003674 -0.000001479 0.000000987 0.000001096 -0.000001832 0.000003022 0.000000628 0.000000610 -0.000001776 0.000001274 -0.000005134 -0.000002352 0.000001449 0.000001950 -0.000003074 0.000036339 0.000030272 0.000004201 -0.000034180 0.000006122 0.000024798 0.000015434 0.000012630 -0.000023801 -0.000004033 -0.000024263 -0.000011430 0.000008365 0.000009242 -0.000015399 0.000001572 0.000001227 -0.000000050 -0.000001315 0.000000229 0.000001483 0.000000447 0.000000008 -0.000000510 0.000000736 -0.000005714 -0.000000911 0.000000248 0.000001395 -0.000002325 -0.000000108 -0.000000014 0.000000237 -0.000000050 -0.000000353 0.000002732 0.000001550 0.000000135 -0.000001370 0.000000541 0.000000411 0.000002570 0.000000552 -0.000002544 -0.000001155 -0.000029274 -0.000101216 0.000537879 -0.000573578 -0.000119600 0.000561528 -0.000230877 -0.002007177 -0.000028077 -0.000003943 0.000331806 -0.000676543 -0.001447228 -0.000831236 0.000035336 0.001127750 -0.000446784 -0.000668286 -0.000861527 -0.000108896 0.001220713 0.000085436 -0.001971030 -0.000687025 -0.000015853 0.000286845 -0.000102061 -0.000413431 -0.000626688 0.000016729 -0.000005497 -0.000008032 -0.000001583 0.000008698 0.000000298 -0.000011746 -0.000005132 -0.000009064 0.000010893 0.000004028 0.000012603 0.000004898 -0.000005743 -0.000003100 0.000009457 -0.000021239 -0.000019007 -0.000001154 0.000020321 -0.000004651 -0.000011717 -0.000006423 -0.000004276 0.000009894 -0.000000163 0.000025523 0.000012778 -0.000004269 -0.000012894 0.000012033 0.000001304 0.000003629 0.000001948 -0.000005430 -0.000002178 0.000006978 0.000007062 0.000000334 -0.000005936 -0.000001102 -0.000001454 -0.000000270 0.000000762 -0.000000148 -0.000000760 0.000008482 0.000004901 -0.000003184 -0.000000613 0.000002505 0.000011032 0.000010637 -0.000000555 -0.000007735 -0.000000444 -0.000007909 -0.000007481 0.000001181 0.000005001 -0.000000190 -0.000008103 -0.000010986 -0.000001682 0.000010414 0.000003193 0.000001363 0.000002451 -0.000000217 -0.000002003 -0.000000609 -0.000005201 -0.000007333 -0.000001482 0.000006862 0.000002200 -0.000000596 0.000000386 0.000000766 -0.000001248 -0.000000634 0.000002696 0.000003775 -0.000000075 -0.000003172 -0.000000918 -0.000007886 -0.000008899 -0.000000598 0.000007305 0.000001606 -0.000002529 -0.000002168 0.000000176 0.000001272 0.000000083 -0.000000452 -0.000001313 0.000000302 0.000001042 0.000000492 0.000001165 0.000001962 0.000000834 -0.000002086 -0.000000928 0.000001434 0.000002654 0.000000672 -0.000002589 -0.000001139 0.000000841 0.000000937 0.000000556 -0.000001038 -0.000000317 -0.000000954 -0.000001492 -0.000000062 0.000001342 0.000000415 -0.000000258 0.000002220 0.000001994 -0.000003676 -0.000002213 -0.000004623 -0.000004206 -0.000000295 0.000003399 0.000000349 0.000007561 0.000008062 -0.000000262 -0.000006168 -0.000000896 0.000007832 0.000008566 0.000000380 -0.000006935 -0.000001404 0.000003308 0.000004147 -0.000000080 -0.000003232 -0.000000793 -0.000002829 -0.000003041 -0.000000399 0.000002623 0.000000539 0.000000479 -0.000000088 -0.000000490 0.000000421 0.000000481 0.000001804 0.000001143 0.000000121 -0.000000898 0.000000160 -0.000004133 -0.000004019 0.000000566 0.000002601 0.000000044 0.000000898 0.000001254 0.000000089 -0.000001083 -0.000000294 0.000001213 0.000001504 0.000000524 -0.000001480 -0.000000500 -0.000001328 -0.000002326 -0.000000216 0.000001958 0.000000802 -0.000010737 -0.000009839 -0.000000012 0.000007765 0.000000620 -0.000005484 -0.000009960 -0.000000623 0.000008872 0.000003082 -0.000007345 -0.000007397 -0.000000008 0.000005647 0.000000955 -0.000001295 -0.000002910 -0.000000169 0.000002215 0.000001174 -0.000002072 0.000000181 -0.000000410 0.000000014 -0.000000625 -0.000002850 -0.000002417 -0.000000486 0.000002243 0.000000117 0.000005704 0.000004453 0.000000330 -0.000003615 -0.000000104 0.000001826 0.000004191 0.000000431 -0.000003742 -0.000001663 0.000005002 0.000004811 -0.000001497 -0.000002470 0.000000312 0.000000418 -0.000000006 0.000000604 -0.000000170 -0.000000047 -0.000003954 -0.000002622 -0.000000531 0.000002778 -0.000000330 0.000000331 0.000000830 -0.000001267 0.000000446 0.000000363 -0.000001487 -0.000000911 -0.000001211 0.000001689 0.000000426 -0.000003576 -0.000004928 0.000000107 0.000003989 0.000001163 -0.000001587 -0.000002021 0.000001060 0.000000889 -0.000000178 -0.000000035 0.000001034 -0.000000499 -0.000000511 -0.000000432 -0.000001150 -0.000000332 0.000000006 0.000000109 -0.000000342 0.000000296 0.000000179 0.000000981 -0.000000787 -0.000000529 -0.000002496 -0.000000956 0.000001278 -0.000000251 -0.000001349 0.000004301 0.000002617 -0.000000214 -0.000001645 0.000000555 -0.000001910 -0.000000271 -0.000000331 0.000000513 -0.000000545 -0.000003315 -0.000002810 0.000000723 0.000001656 -0.000000538 -0.000002896 -0.000000853 -0.000000679 0.000000949 -0.000000400 -0.000002168 -0.000001085 -0.000000787 0.000001384 -0.000000144 -0.000000720 -0.000001171 -0.000000751 0.000001410 0.000000729 0.000001064 0.000000771 -0.000000121 -0.000000537 0.000000312 -0.000000988 -0.000001815 0.000000714 0.000000844 0.000000145 -0.000000318 -0.000000201 -0.000000585 0.000000637 0.000000292 0.000000410 0.000001673 0.000000356 -0.000001563 -0.000001102 -0.000000306 -0.000000961 0.000000731 0.000000281 0.000000059 -0.000023147 -0.000009933 0.000021791 0.000006792 -0.000003707 -0.000010911 -0.000006219 -0.000010829 0.000007246 -0.000009535 0.000022236 0.000007332 -0.000008284 -0.000013169 -0.000002360 0.000004860 0.000002195 -0.000004205 -0.000001011 0.000001567 0.000008165 0.000002362 0.000003213 -0.000003264 0.000006143 -0.000003903 0.000001270 -0.000004476 0.000011791 -0.000000228 0.000013085 -0.000006948 -0.000007395 0.000006521 -0.000004039 -0.000000321 -0.000000315 -0.000000717 -0.000008026 0.000012874 0.000000253 -0.000003391 0.000007699 -0.000002714 -0.000001580 0.000022578 0.000008029 -0.000006822 -0.000008901 0.000007682 0.000000248 -0.000003181 -0.000001047 0.000006515 0.000000321 -0.000001902 -0.000001485 0.000006022 0.000000875 0.000004883 -0.000014283 0.000010345 -0.000009090 0.000004425 -0.000006053 0.000018037 -0.000008455 -0.000004183 0.000018173 -0.000018535 0.000002428 -0.000001007 -0.000002235 0.000003208 0.000002945 0.000017270 -0.000001500 0.000004470 -0.000003953 -0.000001174 -0.000010316 -0.000006703 0.000002883 0.000003658 -0.000001242 0.000015065 0.000007345 0.000003311 -0.000018636 0.000012361 0.000035483 0.000010040 -0.000001195 -0.000012888 0.000005734 0.000012023 0.000005293 0.000004032 -0.000013120 0.000002509 -0.000014218 -0.000006726 0.000005679 -0.000002974 0.000000900 -0.000002487 0.000000057 -0.000003571 0.000008787 -0.000001977 0.000005859 0.000002053 -0.000000689 -0.000003970 0.000003862 0.000005683 0.000001570 -0.000002027 0.000000080 0.000000937 0.035996018 -0.021491831 0.130936300 0.001107745 0.000467500 0.056593899 -0.003939697 0.000404243 0.005956057 0.029410332 0.000247684 0.000714417 -0.006041301 0.019394338 0.361735648 0.000021068 0.000059239 -0.000012424 0.000009064 0.000044139 -0.000000856 0.000020031 0.000000198 -0.000000448 0.000012134 0.000012861 0.000001312 0.000024280 0.000010055 -0.000021076 -0.000009530 -0.000034968 0.000021340 -0.000001962 -0.000038220 -0.000000962 -0.000026525 0.000013622 0.000003599 -0.000027661 0.000000548 0.000012222 -0.000006389 0.000000646 0.000015916 -0.000001539 -0.000002155 0.000001175 0.000000453 -0.000004296 -0.000000829 -0.000002200 0.000001651 0.000000142 -0.000003773 0.000000169 0.000000208 0.000000406 0.000000794 -0.000000628 0.000065524 -0.000058465 -0.000016220 0.000026352 -0.000036057 -0.000232386 0.000323830 0.000065989 -0.000274876 0.000136852 -0.000119146 0.000194066 0.000025933 -0.000127215 0.000074729 -0.000275611 0.000118622 -0.000062867 -0.000066898 0.000038271 0.000129923 -0.000300584 -0.000073152 0.000186271 -0.000154364 0.000479840 -0.000532926 -0.000104725 0.000481210 -0.000192729 0.000053691 0.000101014 0.000077875 -0.000096667 0.000092609 -0.000073378 0.000104707 0.000020653 -0.000099863 0.000134842 -0.000086977 0.000093696 0.000050390 -0.000115477 0.000043410 -0.000070611 -0.000076074 -0.000027835 0.000014091 -0.000050742 0.000040120 -0.000075676 0.000064878 0.000076387 -0.000171629 0.000041737 -0.000014672 -0.000003681 0.000092120 -0.000030972 0.000012375 0.000011846 0.000007538 -0.000000161 0.000002883 -0.000008645 0.000014740 -0.000009758 -0.000019204 0.000032873 -0.000013478 0.000002327 -0.000000708 -0.000025128 0.000010487 0.000004991 0.000019315 -0.000036024 0.000008257 0.000041668 -0.000022934 0.000016302 -0.000043639 -0.000034977 0.000059252 -0.000009177 -0.000004309 0.000007831 -0.000018382 0.000004447 0.000023839 0.000003852 0.000002114 0.000012977 -0.000007103 -0.000004886 0.000006573 -0.000016095 -0.000017910 0.000034719 -0.000011730 0.000004409 -0.000004439 -0.000021163 0.000019220 0.000297003 -0.000296717 -0.000029652 0.000123243 -0.000076868 -0.000023481 0.000051623 0.000031598 -0.000048021 0.000101402 -0.000385526 0.000324915 0.000092351 -0.000375998 0.000240842 -0.000207808 0.000147723 0.000025338 0.000071932 -0.000011041 0.000179661 -0.000091044 -0.000029873 0.000051192 -0.000078350 0.000253418 -0.000181251 -0.000094581 0.000169378 -0.000172170 -0.000002951 -0.000002782 -0.000000158 -0.000001922 -0.000001842 0.000005088 -0.000003682 0.000001277 0.000007970 -0.000007032 -0.000000764 0.000002694 -0.000002901 -0.000003807 0.000007073 -0.000000958 0.000001107 0.000000117 -0.000001990 0.000002230 0.000000909 0.000002752 -0.000000698 -0.000001284 0.000003424 0.000001019 -0.000003300 0.000000655 0.000005143 -0.000005536 0.000000507 -0.000000666 -0.000000097 0.000000251 -0.000001132 -0.000002454 -0.000003138 -0.000001974 0.000001650 -0.000001672 0.000005363 0.000000445 0.000002638 0.000002643 -0.000003781 0.000001643 -0.000002525 0.000025816 -0.000011346 -0.000022135 0.000003828 -0.000002035 0.000024591 0.000010648 -0.000021625 0.000009408 -0.000003444 0.000023726 0.000011267 -0.000024192 0.000000757 0.000002285 0.000003020 -0.000000143 -0.000000290 -0.000005360 0.000000232 -0.000017837 -0.000000765 0.000011356 0.000004468 0.000003290 0.000006166 0.000001332 -0.000004646 -0.000000792 -0.000008949 0.000010306 0.000001779 -0.000015294 -0.000004686 -0.000001154 0.000001039 -0.000002168 0.000001424 -0.000005527 0.000004745 -0.000031489 -0.000007341 0.000025788 -0.000012846 0.000001114 0.000006926 -0.000012708 0.000007037 0.000003518 0.000000199 0.000001622 -0.000000719 -0.000007179 -0.000003539 0.000002134 0.000004702 -0.000003622 -0.000004133 0.000004385 -0.000001080 -0.000001368 0.000002551 -0.000000057 0.000002955 0.000001901 -0.000001216 0.000003574 -0.000000008 -0.000001747 0.000003132 0.000002859 -0.000004948 0.000003966 -0.000000877 -0.000000094 -0.000000016 0.000000239 -0.000002005 -0.000013167 0.000002769 0.000001008 -0.000005245 0.000005403 0.000002921 -0.000000018 -0.000006059 0.000002223 -0.000000173 -0.000107130 0.000020151 0.000035582 -0.000107887 0.000057982 0.000079054 -0.000008332 -0.000002765 0.000094053 -0.000064915 -0.000008543 0.000020555 0.000007439 0.000054916 -0.000061187 0.000161486 -0.000052488 -0.000032980 0.000049937 -0.000047196 -0.000138404 0.000089053 0.000012925 -0.000013448 0.000004208 0.000023969 0.000038294 -0.000014392 0.000010446 -0.000017465 0.000052784 -0.000036901 -0.000000235 -0.000009020 0.000001074 0.000009029 0.000000941 -0.000000473 -0.000002279 0.000014632 -0.000108548 0.000056286 0.000015494 -0.000023752 0.000010072 -0.000000985 -0.000001879 0.000002918 -0.000000806 -0.000002323 0.000001701 -0.000001391 -0.000001177 0.000000975 -0.000003562 -0.000001661 -0.000000685 0.000005238 0.000002857 0.000001193 -0.000001509 0.000000240 0.000000727 -0.000000018 0.000005005 -0.000005619 -0.000001798 0.000005280 -0.000003990 0.000003884 0.000002138 0.000000997 -0.000008987 -0.000000799 0.000002557 0.000000558 -0.000001118 0.000002350 0.000002955 -0.000000041 -0.000004346 -0.000005656 0.000015417 0.000003285 -0.000002532 -0.000004924 -0.000001649 0.000005758 -0.000002266 0.000004276 0.000000260 0.000001433 0.000022082 -0.000003527 -0.000011672 -0.000009630 -0.000007378 0.000006363 0.000001196 0.000001339 0.000012390 0.000010157 -0.000027985 -0.000005444 -0.000003658 0.000000843 0.000000588 -0.000003599 -0.000000580 0.000002126 0.000006198 0.000005973 -0.000009677 -0.000000328 -0.000002286 0.000003655 0.000001874 -0.000000640 0.000004405 -0.000004023 0.000000049 -0.000000882 0.000000398 0.000003070 0.000001150 -0.000000930 -0.000000145 -0.000000990 -0.000002299 -0.000000130 0.000005049 0.000004929 -0.000013711 -0.000002455 0.000002244 -0.000001921 -0.000002877 0.000003680 -0.000000762 -0.000003677 0.000000414 -0.000000460 0.000000510 0.000000918 0.000000253 -0.000001239 -0.000001175 0.000001633 -0.000000500 -0.000001399 -0.000000514 -0.000002103 0.000007904 0.000000700 -0.000008869 0.000001367 0.000000968 -0.000004618 0.000002612 0.000004689 -0.000003943 -0.000004090 0.000006266 -0.000001674 -0.000001506 0.000056319 0.000059023 -0.000020980 0.000004792 -0.000054204 0.000075276 0.000003862 0.000163797 0.000114527 -0.000110341 -0.000017523 -0.000057824 0.000233783 0.000038947 -0.000075225 -0.000000074 0.000001023 -0.000003126 -0.000004510 -0.000000223 0.000003249 0.000001987 -0.000006747 0.000002048 -0.000000189 -0.000001118 -0.000000443 0.000005644 0.000000424 -0.000002729 -0.000001656 -0.000000571 0.000001110 -0.000002029 -0.000000118 -0.000000956 -0.000000410 0.000001078 -0.000000288 0.000000944 0.000000506 0.000000403 0.000000371 0.000000822 -0.000001177 0.000000906 0.000000387 -0.000000795 -0.000000596 0.000003252 0.000001886 0.000001102 -0.000001046 0.000001407 0.000001849 0.000000169 -0.000001365 -0.000000337 0.000000475 -0.000001823 -0.000001142 -0.000000134 -0.000000159 0.000000457 -0.000001278 -0.000001064 -0.000001079 0.000000687 -0.000000082 -0.000002757 -0.000000186 -0.000001337 0.000000413 -0.000000351 -0.000002195 -0.000000698 -0.000000111 -0.000000850 -0.000001002 0.000002969 0.000000468 0.000000622 -0.000000706 -0.000001093 0.000003732 0.000000313 0.000000956 -0.000000303 0.000000284 0.000001709 0.000001147 0.000000077 0.000000307 0.000000848 -0.000000817 0.000000073 -0.000000218 0.000000145 0.000000086 0.000000624 -0.000000625 -0.000000941 0.000000203 -0.000000543 -0.000000547 -0.000000591 -0.000000948 0.000000163 -0.000001016 -0.000000504 -0.000000724 0.000000880 -0.000000802 -0.000000493 0.000002334 -0.000000671 -0.000000603 -0.000000212 -0.000000346 -0.000000235 -0.000000566 0.000000096 0.000000268 0.000000312 -0.000000360 -0.000000947 -0.000001171 0.000000197 -0.000000431 -0.000001323 0.000000704 0.000001447 -0.000000308 0.000000557 0.000001924 0.000000447 0.000002550 -0.000000208 -0.000000228 0.000001656 0.000000472 -0.000001003 -0.000000211 0.000000535 -0.000001850 0.000001229 0.000002596 0.000000012 0.000000088 0.000003120 -0.000002306 0.000006601 0.000000217 0.000002363 -0.000014513 0.000008025 -0.000001964 0.000002906 0.000003830 -0.000004250 0.000008779 0.000005305 0.000000512 0.000003252 0.000016231 -0.000000047 -0.000000013 0.000000165 -0.000000193 -0.000000567 -0.000000126 -0.000000680 0.000000137 -0.000000156 -0.000000944 0.000000604 0.000002704 -0.000000504 0.000000506 0.000002751 0.000000177 0.000000050 0.000000052 0.000000105 0.000000304 -0.000000112 -0.000000681 0.000000264 0.000000058 -0.000000911 0.000000052 0.000000717 0.000000077 0.000000255 0.000000816 -0.000019442 -0.000050411 0.000090438 0.000028816 -0.000011834 -0.000025000 0.000002652 -0.000060817 -0.000061110 0.000036491 -0.000003093 0.000019676 -0.000164815 -0.000039856 0.000068932 -0.000056735 -0.000032042 -0.000046235 0.000005194 0.000070812 -0.000038124 0.000003189 -0.000085286 -0.000081840 0.000051780 0.000008281 0.000015436 -0.000101210 -0.000005817 0.000056123 -0.000000065 -0.000004939 0.000000420 -0.000001425 0.000001877 -0.000006330 0.000002969 -0.000002255 -0.000002657 0.000000371 -0.000005495 -0.000003466 -0.000000320 -0.000002883 -0.000009466 0.000003033 -0.000006007 0.000000058 -0.000000423 0.000009418 -0.000003025 0.000000733 -0.000000571 -0.000001504 0.000003762 -0.000005355 -0.000006282 -0.000000104 -0.000001631 -0.000014430 0.000000295 0.000000664 -0.000000786 0.000000685 0.000001968 -0.000000457 -0.000000100 0.000000651 0.000000081 0.000000349 0.000000608 0.000000190 -0.000000484 0.000000278 0.000000887 -0.000001290 -0.000001773 0.000001440 -0.000001151 -0.000002993 -0.000001140 -0.000000704 0.000001319 -0.000000340 -0.000000848 0.000001214 0.000000572 -0.000001085 0.000000639 0.000001010 0.000000158 -0.000000529 -0.000000352 -0.000000713 -0.000001904 -0.000000169 0.000000020 -0.000000036 -0.000000271 0.000000492 -0.000000223 -0.000000268 -0.000000118 -0.000000708 -0.000001297 0.000000132 0.000000335 -0.000000315 0.000000151 0.000000607 -0.000000389 0.000000174 0.000000286 -0.000000183 0.000000568 0.000000467 -0.000000084 -0.000000969 -0.000000310 -0.000000370 0.000000215 0.000000112 -0.000000518 -0.000000065 0.000000277 0.000000156 -0.000000103 0.000000007 0.000000270 -0.000000471 0.000000270 0.000000211 0.000000011 0.000000453 0.000000584 0.000000110 0.000000290 0.000000097 0.000000284 0.000000775 0.000000191 0.000000037 0.000000018 0.000000359 0.000000097 0.000000084 -0.000000023 0.000000026 0.000000032 -0.000000325 0.000000521 0.000000886 -0.000000412 0.000000779 0.000001913 0.000000204 0.000000242 -0.000000491 -0.000000303 0.000000261 -0.000000897 -0.000000172 0.000000848 -0.000000100 0.000000070 -0.000000568 -0.000000076 0.000000843 0.000000267 0.000000352 -0.000000396 0.000000004 0.000000271 -0.000000083 0.000000477 0.000000041 0.000000131 -0.000000062 -0.000000279 -0.000000256 -0.000000184 -0.000000245 0.000000047 -0.000000210 -0.000000392 -0.000000025 -0.000000220 0.000000203 0.000000160 -0.000000404 0.000000632 0.000000269 -0.000000571 0.000000283 0.000000342 -0.000000086 0.000000080 0.000000110 -0.000000015 0.000000144 0.000000181 0.000000110 0.000000139 0.000000313 0.000000164 0.000000035 -0.000000208 -0.000000211 -0.000000020 -0.000000480 0.000001004 0.000000540 -0.000001343 -0.000000022 0.000000744 0.000001095 -0.000001102 -0.000000468 0.000000157 -0.000002423 0.000000784 0.000000135 -0.000000922 0.000000000 -0.000000134 0.000000317 -0.000000686 -0.000000359 0.000000015 -0.000000884 0.000000098 0.000000544 -0.000000281 -0.000000266 0.000000819 0.000000114 0.000000013 -0.000000382 -0.000000363 0.000000360 -0.000000289 -0.000000468 0.000000731 0.000000419 -0.000000665 -0.000000349 0.000000678 0.000000192 0.000000096 0.000001399 -0.000000837 -0.000000564 0.000000644 -0.000000705 -0.000000565 0.000000064 0.000000159 0.000000207 0.000000441 -0.000000169 0.000000172 0.000000572 -0.000000259 -0.000000306 0.000000871 -0.000000527 -0.000000061 0.000000163 -0.000000810 -0.000000157 -0.000000150 -0.000000087 -0.000000168 -0.000000707 -0.000000009 0.000000461 -0.000000195 -0.000000335 0.000000174 -0.000000781 0.000000438 0.000000185 -0.000000190 0.000000679 0.000000200 -0.000000356 0.000000174 0.000000009 -0.000000488 0.000000598 -0.000000022 0.000000203 -0.000000262 -0.000000104 0.000000559 0.000000260 0.000000203 0.000000072 0.000000653 0.000000292 0.000000313 0.000001045 -0.000000202 0.000000560 0.000001366 -0.000000251 -0.000000668 0.000000531 0.000000222 -0.000000931 -0.000000354 0.000000632 -0.000000079 -0.000000472 0.000000848 0.000000643 0.000000352 -0.000000437 0.000000438 0.000000797 -0.000000091 0.000000419 -0.000000542 -0.000000525 0.000000951 -0.000000201 0.000000197 -0.000000215 -0.000000671 0.000000599 -0.000000032 -0.000000340 -0.000000157 -0.000000419 -0.000000485 -0.000000135 -0.000000178 0.000000088 -0.000000039 -0.000000437 0.000000616 -0.000000147 -0.000000266 0.000000590 -0.000000143 -0.000000267 0.000000002 0.000000043 -0.000000418 -0.000000138 -0.000000183 0.000000534 0.000000144 0.000000058 0.000000998 0.000000414 0.000000023 -0.000000054 0.000000612 -0.000000199 0.000014178 0.000030939 -0.000033497 0.000043734 -0.000018662 0.000001395 0.000026945 -0.000008841 0.000000555 0.000001611 -0.000004265 -0.000032931 0.000017823 0.000008119 0.000011327 0.000007839 -0.000008234 -0.000001515 0.000010806 -0.000000893 0.000001257 -0.000010670 -0.000000050 0.000006982 -0.000003620 -0.000008771 0.000008599 0.000002512 -0.000008725 0.000003456 -0.000010537 0.000010804 0.000025010 0.000011608 0.000021845 0.000019043 -0.000028261 -0.000008034 -0.000006804 -0.000009155 0.000006538 0.000013078 -0.000005791 0.000029190 -0.000001264 -0.000004082 -0.000019378 0.000011459 0.000005802 0.000000476 -0.000001040 0.000000036 0.000008736 0.000006249 0.000008319 0.000011175 -0.000008178 -0.000016197 0.000019697 -0.000014774 -0.000021788 -0.000002132 0.000005288 0.000002441 0.000007465 -0.000012278 0.000013493 0.000007209 -0.000026986 0.000008140 0.000005724 -0.000010711 0.000002422 0.000006498 0.000004549 0.000001967 0.000000132 0.000001748 -0.000002693 -0.000000943 0.000005623 0.000001763 -0.000000838 0.000000841 0.000004352 0.000002234 -0.000015152 -0.000002639 0.000013724 -0.000008917 0.000001922 -0.000009667 0.000001103 0.000000720 -0.000004353 -0.000000651 -0.000009607 0.000003876 0.000001395 -0.000004337 0.000006115 -0.000001503 -0.000007650 0.000005363 0.000002062 -0.000000451 0.000009772 0.000000254 -0.000004366 0.000001383 0.000001522 -0.000006649 0.000000011 0.000002377 -0.000003325 -0.000001737 -0.000003912 0.000000837 0.000002305 0.000000479 0.465217002 0.208774811 0.171170270 0.037949720 -0.004744923 0.374245049 -0.160217037 -0.092925712 0.081472815 0.196688331 -0.093137216 -0.081343788 0.053280416 0.093378566 0.094223649 0.098449136 0.066552473 -0.118605863 -0.061741440 -0.043405930 -0.000482013 -0.000255546 -0.000077960 0.000389266 0.000306962 -0.000372012 -0.000180253 -0.000172011 0.000267212 0.000166328 -0.000452228 -0.000314752 -0.000141962 0.000336765 0.000350192 -0.001076319 -0.000726043 -0.000522923 0.000717120 0.000569551 0.005688785 0.003321689 0.002260515 -0.003467305 -0.002971409 0.002249884 0.001576981 0.000838127 -0.001443119 -0.001376418 -0.002768449 -0.002188731 -0.001429153 0.001408769 0.001573210 -0.004689513 -0.002854905 -0.001850619 0.002682541 0.002416845 -0.006814629 -0.003909823 -0.002668998 0.004033630 0.003393865 0.006330507 0.004239741 0.002902320 -0.003365394 -0.003298614 0.003735555 0.002284053 0.001305818 -0.002188349 -0.002017158 0.001238267 0.000653267 0.000636766 -0.000628736 -0.000464165 -0.005523343 -0.004335605 -0.003210984 0.002423860 0.002767864 -0.001648401 -0.000151085 0.000585315 0.001646053 0.001075094 0.000555343 0.000430032 -0.000729716 -0.000835826 -0.001102654 0.001151849 0.000830722 0.000484585 -0.000598384 -0.000715956 0.000099886 -0.000132003 -0.000121679 -0.000157088 0.000031506 -0.000173591 -0.000107084 0.000228006 0.000264173 0.000314119 0.002062072 0.001427116 0.001349522 -0.000495113 -0.000740756 -0.000217938 -0.000635914 -0.001078479 -0.000436774 -0.000308041 -0.000215898 -0.000298482 0.000524973 0.000385730 0.000719699 0.000806938 0.000775238 0.000655424 -0.000232365 -0.000361885 0.000040616 -0.000238174 -0.000373377 -0.000263937 -0.000101863 -0.000043099 -0.000072841 0.000120848 0.000093765 0.000179805 -0.001748259 -0.000754537 -0.000650747 0.001108555 0.000737778 0.001065858 0.000588783 0.000407038 -0.000614866 -0.000503980 0.002967797 0.001433533 0.001222435 -0.001747352 -0.001254812 -0.000027102 -0.000025306 -0.000065296 -0.000007403 -0.000005823 -0.000738921 -0.000383891 -0.000231870 0.000452620 0.000357262 -0.001179700 -0.000535459 -0.000469508 0.000688807 0.000477231 -0.000662065 -0.000481393 -0.000046064 0.000466161 0.000626882 0.000404812 0.000412395 -0.000002531 -0.000296023 -0.000537543 0.000109662 0.000028958 -0.000087634 -0.000131196 -0.000135446 -0.000008338 -0.000009159 0.000015563 0.000019264 0.000025031 0.000207883 0.000111430 0.000036912 -0.000150345 -0.000123883 -0.000099850 -0.000062944 -0.000071978 0.000033732 0.000036158 0.000088574 0.000074628 0.000025372 -0.000054305 -0.000080255 -0.000301985 -0.000224603 -0.000132496 0.000152872 0.000191112 0.000061317 0.000058846 0.000121935 0.000021083 0.000037146 -0.000221962 -0.000065710 -0.000083601 0.000115988 0.000043195 -0.000034876 -0.000229152 -0.000002254 -0.000021168 0.000141603 -0.000114923 -0.000358936 0.000006167 0.000046071 0.000277574 0.000020279 0.000056981 -0.000005556 -0.000000412 -0.000069897 0.000280238 0.000007768 -0.000033065 -0.000157763 -0.000214377 0.000375144 0.000136813 -0.000165483 -0.000358244 -0.000439222 -0.001479425 -0.000499610 -0.000501633 0.000051455 0.000579913 0.000200012 0.000256504 0.000970664 0.000736802 0.000606080 0.000495760 0.000712872 -0.000023474 0.000110870 -0.000605906 -0.000114929 -0.000064156 -0.000059965 0.000055808 0.000043836 -0.000031731 0.000009965 0.000054268 0.000054933 0.000041605 -0.000058448 -0.000028084 0.000054368 0.000073879 0.000079800 0.000022001 0.000000174 -0.000015200 -0.000026169 -0.000017409 0.000190904 0.000132440 0.000105019 -0.000091737 -0.000086648 0.000130077 0.000113449 0.000057228 -0.000068842 -0.000086540 0.000000077 0.000009045 0.000021687 0.000010802 0.000006762 -0.000175912 -0.000183575 -0.000164864 0.000036225 0.000073631 -0.000103643 -0.000153178 -0.000163439 -0.000020244 0.000025568 0.000020390 -0.000000656 0.000017117 -0.000010304 0.000002017 0.000002454 -0.000018388 0.000017940 0.000000086 0.000015537 0.000194273 0.000108821 0.000083451 -0.000108270 -0.000089444 -0.000021251 0.000006396 -0.000007870 0.000015101 -0.000001045 0.000026821 0.000021087 0.000028666 -0.000008314 -0.000010041 0.000120945 0.000060036 0.000047175 -0.000071479 -0.000052847 -0.000012229 -0.000029968 -0.000011274 0.000000392 0.000017338 0.000174045 0.000096243 0.000051785 -0.000105637 -0.000088283 0.000126995 0.000061322 0.000063680 -0.000070229 -0.000050630 0.000330875 0.000178119 0.000202240 -0.000245719 -0.000098419 0.000694319 0.000160878 0.000728468 -0.000113800 0.000100999 0.000001460 0.000103527 -0.000152784 0.000217494 -0.000176411 -0.000480248 -0.000143618 -0.000343947 0.000645473 0.000115276 -0.000016386 0.000369872 -0.000694802 -0.000549265 -0.000808674 0.000700852 0.000064975 0.000133225 -0.001080369 -0.000201409 0.000111548 -0.000319887 0.000216761 0.000095549 0.000458266 0.000672699 -0.000226570 0.000869593 0.000374382 0.000725895 -0.000788999 -0.000126337 -0.000740071 0.000112996 -0.000283389 -0.000046221 0.000179998 -0.000322337 -0.000224082 -0.000381726 0.000415017 0.000348235 0.000077439 -0.000367171 -0.000378544 0.000290955 -0.000132403 0.000686433 0.000328131 0.000483835 -0.000092860 -0.000065934 -0.000076008 0.000028459 0.000031335 -0.000796968 -0.000269123 -0.000372256 0.000458825 0.000184699 -0.000184022 0.000002072 0.000000150 0.000207393 0.000069575 0.000212455 0.000065178 0.000087398 -0.000121250 -0.000078127 -0.000249278 0.000042130 -0.000243132 0.000107166 -0.000139975 -0.000523092 -0.000200629 -0.000294353 0.000208411 0.000078095 0.001244592 0.000555964 0.000312881 -0.002018468 -0.000869453 0.000251822 -0.000326183 0.000333374 -0.000402941 0.000733857 0.000545339 0.000480418 -0.000422912 -0.001034069 -0.000884084 0.000227154 0.000025187 0.000473921 0.000421846 0.000236866 -0.000368064 -0.000411467 -0.000278803 0.000116700 0.000135638 0.001114723 0.000107654 0.000670480 -0.000248084 0.000454434 -0.001526006 -0.000755821 -0.000114732 0.001225146 0.000871453 -0.000298928 -0.001020817 0.001070110 0.001101091 0.001344036 0.001902423 0.000701547 0.001010329 -0.000928380 -0.000485501 -0.000083086 0.000001288 -0.000023293 0.000055017 0.000005796 -0.000087665 -0.000020224 -0.000054988 0.000027560 -0.000007746 0.000006960 0.000026595 0.000016115 0.000002700 -0.000011245 -0.000036448 0.000008704 -0.000010416 0.000019457 -0.000003531 -0.000069317 -0.000013931 -0.000051960 0.000045017 0.000003179 -0.000070092 -0.000003840 -0.000050364 0.000057533 -0.000010684 0.000376900 0.000188876 0.000099444 -0.000242722 -0.000199559 0.000284869 0.000167307 0.000056697 -0.000214180 -0.000200620 0.000064775 0.000072754 0.000012927 -0.000057615 -0.000093189 0.000017608 -0.000021304 0.000037584 -0.000007363 0.000041507 -0.000432890 -0.000250275 -0.000119682 0.000279165 0.000272556 -0.000242572 -0.000111903 -0.000075662 0.000148867 0.000112152 0.000656710 0.000377747 0.000276239 -0.000424608 -0.000373108 0.000402957 0.000270293 0.000069176 -0.000325862 -0.000323888 0.000163977 0.000060064 0.000040044 -0.000079989 -0.000060921 -0.000396423 -0.000224103 -0.000184096 0.000232498 0.000215336 -0.000148884 -0.000143896 -0.000025747 0.000131188 0.000180948 0.000060033 0.000011694 0.000000819 -0.000026400 -0.000007076 -0.000077551 -0.000011257 -0.000008472 0.000080749 0.000008229 0.000405370 0.000235014 0.000188349 -0.000275185 -0.000215885 0.000145370 0.000066989 0.000059947 -0.000101419 -0.000100028 -0.000088107 -0.000060034 -0.000020195 0.000065114 0.000068522 0.000033492 0.000040149 0.000044329 -0.000003874 -0.000027115 0.000038688 -0.000002264 0.000006317 -0.000031099 -0.000001712 0.000042983 0.000008005 -0.000001959 -0.000036215 -0.000016476 -0.000110818 -0.000047689 -0.000046554 0.000056767 0.000041024 0.000064126 0.000017504 -0.000001264 -0.000050975 -0.000029088 -0.001803632 -0.000898451 -0.000422248 0.001092416 0.000950828 -0.002593163 -0.001419919 -0.001198648 0.001449562 0.001342347 0.000256655 -0.000085705 -0.000024787 -0.000157729 0.000018485 -0.000128435 -0.000054404 -0.000037501 0.000075470 0.000048718 -0.000070370 -0.000053331 -0.000044943 0.000047532 0.000046929 0.000236741 0.000126196 0.000172796 -0.000133892 -0.000101313 0.000011180 0.000002954 -0.000008403 -0.000009947 -0.000006622 -0.000077245 -0.000052946 -0.000046876 0.000056140 0.000056652 -0.000183723 -0.000127795 0.000020393 0.000170129 0.000175832 0.000930541 0.000285764 0.000342752 -0.000560576 -0.000283305 -0.000203301 0.000294942 -0.000501426 -0.000205856 -0.000392773 -0.001096869 -0.000261766 -0.000659645 0.000501964 0.000166486 0.000760255 0.000488353 -0.000220495 -0.000798549 -0.000618603 0.000229096 0.000629777 -0.000618390 -0.000686263 -0.000813424 -0.000675064 -0.000190057 -0.000538769 0.000232185 0.000046620 0.000211520 0.000109367 -0.000062750 -0.000164883 -0.000161411 0.001597031 0.000906907 0.000820488 -0.000861059 -0.000801097 -0.000078935 0.000073485 0.000047534 0.000030334 -0.000061319 0.000914148 0.000438896 0.000108474 -0.000572178 -0.000493509 0.000987102 0.000514106 0.000462553 -0.000549606 -0.000480970 -0.000790718 -0.000264492 -0.000228461 0.000446834 0.000275301 -0.000159316 -0.000125536 -0.000000551 0.000148362 0.000169516 -0.000028860 -0.000011193 -0.000029594 0.000011837 0.000007953 0.000009638 -0.000007227 0.000026689 0.000006905 0.000009808 0.000292531 0.000250728 -0.000073059 -0.000299973 -0.000349055 0.000003724 0.000039899 -0.000091428 -0.000062538 -0.000085832 0.000050392 -0.000002452 0.000072999 0.000001127 0.000024425 0.000185007 0.000110300 0.000048359 -0.000139460 -0.000125475 -0.000019264 -0.000008124 -0.000000284 0.000016185 0.000008823 0.000082881 0.000055513 0.000026311 -0.000060482 -0.000059517 -0.000092014 -0.000076288 0.000006775 0.000087268 0.000103836 -0.000065957 -0.000032599 -0.000019714 0.000047136 0.000036505 0.000090454 0.000044780 0.000050797 -0.000053035 -0.000040828 -0.000008652 -0.000017828 0.000018342 0.000018867 0.000031268 0.000023239 0.000008521 0.000002438 -0.000018254 -0.000009932 -0.000029763 -0.000027347 -0.000003161 0.000025806 0.000033559 -0.000046133 -0.000033301 -0.000004328 0.000039133 0.000040643 -0.000009728 -0.000010889 -0.000004884 0.000007138 0.000011780 0.000017573 0.000008889 0.000004224 -0.000013161 -0.000009829 -0.000158495 -0.000125911 0.000005368 0.000144911 0.000166200 0.000006112 -0.000007854 0.000035915 0.000013587 0.000022974 -0.000090919 -0.000027705 -0.000053066 0.000049243 0.000018704 -0.000060932 -0.000020292 -0.000053868 0.000025132 0.000008320 -0.000034973 -0.000012225 -0.000017179 0.000021585 0.000009955 0.000001604 -0.000000113 0.000017297 0.000006890 0.000008338 0.000020919 0.000022572 -0.000005619 -0.000023173 -0.000031614 0.000015428 0.000013469 -0.000016934 -0.000022354 -0.000024201 0.000020879 -0.000006124 0.000027049 -0.000001861 0.000017758 -0.000029541 -0.000018227 -0.000006153 0.000022722 0.000021690 -0.000024954 -0.000019784 -0.000008459 0.000018440 0.000022227 0.000040491 0.000025026 0.000005766 -0.000032222 -0.000029736 0.000048236 -0.000013321 0.000085474 0.000007797 0.000053596 0.000408181 0.000259642 0.000026960 -0.000349165 -0.000325494 -0.000010477 -0.000027421 0.000049840 0.000057221 0.000060056 0.000075944 0.000050758 -0.000003547 -0.000069208 -0.000064863 -0.000124858 -0.000095179 0.000029860 0.000132168 0.000143728 0.000104652 0.000054511 0.000027858 -0.000079419 -0.000060176 -0.000012421 0.000015033 -0.000047081 -0.000018318 -0.000040270 -0.000177703 -0.000116034 0.000000443 0.000162588 0.000153269 -0.000027593 0.000012526 -0.000033113 0.000003872 -0.000026119 0.000006149 0.000001844 -0.000002616 -0.000007222 -0.000004706 0.000056483 0.000018997 0.000041783 -0.000026606 -0.000006767 0.000004131 0.000008340 0.000004410 -0.000004184 -0.000007656 0.000024665 0.000015687 0.000016413 -0.000013173 -0.000011611 0.000090313 0.000047631 0.000020298 -0.000068498 -0.000055070 0.000028706 0.000006720 0.000008986 -0.000018651 -0.000006924 -0.000019256 -0.000013112 0.000007010 0.000020993 0.000020802 -0.000018418 -0.000019076 0.000013437 0.000025310 0.000030862 -0.000005672 -0.000007810 -0.000002289 0.000004560 0.000007634 -0.000029679 -0.000041741 0.000028699 0.000044569 0.000062855 0.000018534 0.000037655 -0.000038555 -0.000039787 -0.000064387 -0.000015787 -0.000022240 0.000029399 0.000030016 0.000041793 0.000059085 0.000019795 0.000027287 -0.000036293 -0.000016431 -0.000084319 -0.000068749 0.000033709 0.000098588 0.000107437 0.000029739 0.000011585 0.000023487 -0.000014046 -0.000004597 0.000034979 0.000026147 0.000001913 -0.000031102 -0.000032354 -0.000030600 -0.000014902 -0.000009239 0.000022416 0.000016715 0.000038350 0.000020552 -0.000001416 -0.000033854 -0.000029039 0.000006100 0.000005234 0.000004644 -0.000003541 -0.000004019 -0.000037389 -0.000028696 0.000005059 0.000036232 0.000038883 0.000010362 0.000003547 -0.000001988 -0.000009528 -0.000006565 0.000214772 0.000111151 0.000099603 -0.000163459 -0.000122400 -0.000262210 -0.000068631 -0.000183707 0.000063336 0.000041158 -0.000257739 -0.000185586 -0.000058254 0.000092488 0.000163905 0.000077802 0.000027934 0.000038029 -0.000016110 -0.000008205 -0.000096334 -0.000077567 0.000008770 0.000093114 0.000081599 0.000115927 0.000030186 -0.000020344 -0.000033661 -0.000052591 0.000001384 0.000022470 -0.000042610 0.000002230 -0.000033233 -0.000041657 -0.000004438 0.000009067 0.000030996 0.000019317 0.000016046 0.000002474 0.000039510 -0.000012187 0.000007168 -0.000108723 -0.000076056 0.000009065 0.000099958 0.000090975 0.000102423 0.000023471 -0.000010304 -0.000037247 -0.000033464 0.000020245 0.000001110 0.000018199 0.000012985 -0.000000228 -0.000011228 -0.000025886 -0.000024802 -0.000140622 -0.000070665 0.000097210 0.000117935 -0.000015971 -0.000047998 -0.000107536 -0.000475360 -0.000200878 -0.000201101 0.000168792 0.000163706 -0.000205798 -0.000109500 -0.000013278 0.000192028 0.000143071 0.000379305 0.000167815 0.000090357 -0.000215347 -0.000162906 0.000070149 -0.000016416 0.000062379 0.000024795 0.000048980 -0.000496981 -0.000898765 -0.000323502 0.000195648 0.000470171 -0.000742364 0.000008159 0.000062475 0.000464041 0.000405291 0.000281336 0.000030250 -0.000170420 -0.000195996 -0.000321519 0.000440388 0.000287510 0.000277093 -0.000207415 -0.000174486 -0.000170966 -0.000140333 -0.000108747 0.000122695 0.000120305 0.000246051 0.000098928 0.000031364 -0.000075098 -0.000065226 0.108270054 -0.000193768 0.665903576 -0.000036219 0.029340207 0.598674589 -0.000174772 -0.074896138 0.194698858 0.288975870 -0.000282631 -0.000136238 0.000027542 0.000021797 0.503406723 0.001380003 0.000151977 -0.000248401 -0.000162484 0.154431647 0.000630347 -0.000018130 -0.000055821 -0.000053875 -0.030876131 -0.000525996 0.000098916 0.000093628 0.000147866 -0.098994053 -0.000976748 0.000230285 0.000182805 0.000132038 -0.043762661 -0.001560150 0.000188486 0.000253281 0.000160315 -0.044692143 0.001161913 -0.000302886 -0.000255444 -0.000265481 -0.007693403 0.000868968 -0.000168081 -0.000155087 -0.000156439 -0.029455590 0.000131780 -0.000123008 -0.000083656 -0.000026651 -0.028938247 -0.000530341 0.000403735 0.000256992 0.000253598 0.001534124 -0.000982623 0.000071090 0.000088241 0.000092193 0.000385625 0.000967754 0.000222326 0.000136888 -0.000114843 -0.002899459 0.000276895 -0.000233684 -0.000069239 -0.000107151 0.000376536 0.000051751 -0.000034299 -0.000012697 0.000090460 0.000182932 -0.000281746 -0.000210628 -0.000158564 0.000084429 0.000228221 -0.000285198 -0.000099357 -0.000063658 -0.000045800 0.000270988 0.000610738 -0.000000453 0.000017489 -0.000043341 0.000029348 -0.000362961 -0.000022674 -0.000032774 0.000038669 0.000118698 -0.000040233 -0.000048547 -0.000029825 -0.000030771 -0.000867416 0.000249848 0.000005508 -0.000004141 -0.000008811 -0.000637867 -0.000144752 -0.000067974 -0.000048379 0.000025050 0.000221430 -0.000438249 0.000068273 0.000072194 -0.000004554 -0.005149890 0.000219929 -0.000076462 -0.000055007 -0.000026458 0.016957147 0.000630766 -0.000200987 -0.000157290 -0.000050889 0.043983402 0.000015252 0.000010149 0.000003216 0.000003978 -0.003544898 -0.000179351 0.000040229 0.000036706 0.000018257 -0.003491172 -0.000244260 0.000088119 0.000065902 0.000022652 -0.001947259 -0.000386013 0.000352878 0.000114969 0.000186180 -0.000240122 0.000322673 0.000045616 -0.000023856 -0.000145993 0.000136477 0.000111549 0.000174518 0.000048347 -0.000018136 0.000066306 -0.000021121 -0.000015027 0.000004353 -0.000000030 0.000029595 0.000072283 -0.000084796 -0.000058535 -0.000037940 0.000035695 0.000004817 -0.000103092 -0.000046619 -0.000029561 -0.000014864 0.000041112 -0.000052505 -0.000068272 -0.000053523 0.000018832 -0.000074049 0.000097403 0.000047500 0.000055496 -0.000205992 -0.000074168 0.000097557 0.000093273 0.000084746 -0.000001258 0.000008916 -0.000003570 -0.000001078 0.000001915 -0.000008966 0.000022874 0.000013971 -0.000000559 0.000012824 -0.000019140 -0.000067298 0.000004838 -0.000007165 0.000020746 0.000008029 0.000057104 0.000001451 0.000008230 -0.000008094 0.000031384 -0.000094813 0.000004029 0.000007734 0.000003407 -0.000038194 0.000246602 -0.000042560 -0.000029300 -0.000033423 0.000049588 0.000326529 0.000044088 0.000012883 0.000024926 -0.000001604 -0.000459851 0.000004449 -0.000015993 0.000049064 0.000171532 0.000012093 -0.000008750 0.000020860 -0.000036695 0.000051390 -0.000004117 0.000005297 0.000003898 0.000003167 -0.000051120 -0.000048420 -0.000010732 -0.000007016 0.000002592 0.000108174 -0.000069838 -0.000012120 -0.000007297 0.000007908 0.000074737 0.000019643 -0.000008480 -0.000006083 -0.000003150 0.000032608 0.000013300 -0.000011328 -0.000009788 -0.000008136 -0.000231323 0.000034836 -0.000012833 -0.000010347 -0.000011467 -0.000282603 -0.000014588 0.000004649 0.000002464 0.000000575 0.000024500 0.000022571 0.000015404 0.000009335 0.000007409 -0.000055269 0.000052616 0.000012138 0.000007230 0.000001565 0.000048079 0.000003345 -0.000003010 -0.000001671 0.000000279 0.000095567 -0.000000632 0.000000533 0.000000683 0.000002921 0.000282941 0.000037697 -0.000013222 -0.000009408 -0.000005811 0.001037787 -0.000005064 0.000003437 0.000002256 -0.000001106 0.000182042 -0.000000043 -0.000001928 -0.000000935 -0.000002156 0.000638987 0.000025896 -0.000008304 -0.000006378 -0.000001753 0.001385668 0.000002500 0.000000981 0.000000833 0.000004606 0.000083032 0.000041883 -0.000010434 -0.000008485 -0.000004776 0.000723026 0.000024774 -0.000005230 -0.000004028 -0.000001492 0.000333392 -0.000110725 0.000042565 0.000091441 0.000002371 0.000012766 -0.000743442 0.000074538 0.000112507 0.000036663 0.000027446 0.000257508 -0.000087621 -0.000117536 -0.000030706 0.000009941 0.000139273 -0.000021632 -0.000049483 -0.000007711 -0.000019918 0.000730945 -0.000051245 -0.000052346 -0.000015190 -0.000011579 -0.000249798 0.000037904 0.000084074 -0.000008685 0.000027677 -0.000272080 0.000008379 0.000011693 0.000009080 0.000021498 -0.000626709 -0.000001706 -0.000008872 0.000010959 0.000046709 0.000594252 -0.000050132 -0.000070722 -0.000025126 -0.000020428 0.000359637 -0.000043468 -0.000053738 -0.000022221 0.000000328 -0.000059332 -0.000039956 -0.000044196 -0.000021432 0.000021985 -0.000651491 0.000084355 0.000106793 0.000041243 0.000005312 0.000106992 0.000003089 0.000005578 0.000002212 -0.000000466 0.000323349 0.000028055 0.000026448 0.000014746 -0.000041933 -0.000048256 -0.000002475 -0.000008446 -0.000001826 -0.000007414 -0.000089114 -0.000010467 -0.000019478 -0.000001893 0.000015514 0.000232878 -0.000019239 -0.000035248 -0.000014067 -0.000015912 0.000283606 0.000046149 0.000060963 0.000018723 -0.000028875 -0.000215361 -0.000002905 0.000032822 -0.000019702 0.000035673 -0.000484431 0.000021056 0.000024546 0.000014485 0.000013819 0.000865498 -0.000009953 0.000015541 -0.000019947 0.000017448 -0.000140606 0.000007693 0.000006134 0.000002996 0.000026220 0.000433899 -0.000001221 -0.000002811 0.000003238 -0.000000953 -0.000611065 0.000005939 0.000017298 0.000002425 0.000047403 -0.000192195 0.000149220 0.000154441 0.000073038 -0.000104506 -0.000569029 0.000119550 0.000136691 0.000077360 0.000132384 -0.000145106 -0.000124055 -0.000126744 -0.000069653 0.000196846 0.000016708 0.000003754 0.000001094 -0.000000437 -0.000010370 0.000038975 0.000002610 0.000000826 0.000001445 -0.000002994 -0.000010369 0.000001419 0.000002434 -0.000001268 -0.000000911 -0.000000740 0.000002922 0.000006345 -0.000001062 -0.000006579 0.000033182 -0.000005529 -0.000010329 -0.000001238 -0.000002839 0.000053552 -0.000017048 -0.000024587 -0.000007461 -0.000002969 0.000138365 -0.305484093 0.000653670 0.055637542 0.000063612 0.000124125 0.060354737 -0.127204742 -0.043069564 0.000046540 0.000042854 0.087977670 -0.024174231 -0.099889749 -0.000118228 -0.000007958 -0.046782082 -0.007844694 0.008970049 -0.000153099 -0.000180666 -0.056927553 0.047941018 0.033297894 -0.000045336 -0.000091434 -0.012264143 0.021912832 0.021006113 -0.000004508 0.000184610 -0.032828203 0.030915354 0.023126784 -0.000202048 0.000183495 0.032603957 -0.027367990 -0.015455258 0.000146505 0.000067024 0.022854744 -0.018614305 -0.022510720 0.000004792 -0.000103877 0.057953434 -0.051055663 -0.037147614 0.000108152 -0.000100133 -0.003785149 -0.042026597 -0.024441402 0.000010942 0.000032328 -0.015973075 -0.008856552 0.006735034 0.000010659 -0.000044619 -0.141520720 0.067984764 0.049269937 0.000045841 0.000093537 0.008465205 -0.264757667 -0.096985024 -0.000143473 0.000056007 0.020114275 -0.115540014 -0.129896067 -0.000059133 -0.000032365 -0.002067268 0.023940092 0.013517467 -0.000029221 0.000002000 -0.001623637 -0.000555644 -0.001888055 -0.000067774 0.000005036 0.000653554 -0.009498222 -0.001002316 0.000031587 0.000015737 -0.000290310 -0.003570762 0.000729138 0.000201291 -0.000029396 -0.003491777 -0.001492499 -0.003140967 -0.000021588 0.000022054 0.000398941 -0.003396005 0.005770499 0.000066182 -0.000723307 -0.004158655 0.000993894 -0.000827631 -0.000009367 -0.000811977 -0.000372123 -0.002461152 -0.001933373 0.000730472 0.000071193 0.001283156 -0.001575550 -0.002560713 0.000438755 -0.000057448 -0.002504499 -0.003583526 0.000727258 0.000028245 -0.000028305 -0.003497801 0.000159661 -0.002633512 0.000011125 0.000024851 0.001053932 -0.002311343 0.006282582 -0.000062057 0.000017253 -0.001548459 -0.001116673 0.000048605 0.000007859 -0.000000361 0.025439654 -0.000356912 -0.008254021 0.000003625 -0.000139282 0.013153722 -0.000448575 0.000969441 -0.000019260 0.000006901 -0.000069011 -0.000065655 -0.000029441 0.000109389 0.000194954 -0.000018873 -0.000024583 -0.000017778 -0.000085195 0.000119067 0.000057084 0.000054965 0.000032689 -0.000127911 0.000178920 -0.000086531 -0.000087448 -0.000042288 0.000020449 0.000323088 -0.000081580 -0.000095043 -0.000049355 -0.000082116 0.000156774 0.000027928 0.000026234 0.000018739 -0.000070920 0.000148149 0.000556117 -0.001004328 -0.000208179 0.000081795 0.000463333 0.001754835 -0.000131757 0.000093657 -0.000519201 -0.000001447 0.000427579 0.000648326 0.000570418 -0.000134247 0.000392876 0.000445601 0.001260013 0.001398071 -0.000053609 0.000305071 -0.000946376 0.000560515 0.000534102 -0.000232487 -0.000245799 -0.000949414 -0.000100763 0.000024683 -0.000249256 -0.000103044 -0.000030930 0.000046951 -0.000011980 -0.000005753 0.000010742 0.000008708 -0.000074269 -0.000000896 -0.000002551 -0.000026527 0.000044198 0.000053414 0.000047587 0.000002050 0.000277381 -0.000024042 -0.000001723 -0.000109715 0.000009462 0.000106519 -0.000076049 -0.000230318 0.000008659 -0.000002140 -0.000040690 -0.000050551 0.000367756 -0.000038733 0.000008242 0.000054958 0.000031063 0.000063360 0.000015646 0.000007449 -0.000006726 0.000012785 0.000008484 0.000006565 -0.000001383 0.000018707 -0.000005506 0.000001185 -0.000018251 0.000001121 -0.000070380 0.000001234 0.000006213 0.000010780 -0.000002268 -0.000015465 -0.000016627 -0.000024455 -0.000006263 -0.000004278 -0.000002778 0.000023700 0.000054275 0.000021479 0.000002847 -0.000026240 0.000007939 0.000023188 0.000003011 0.000000194 0.000007601 0.000002590 -0.000000718 -0.000001520 0.000002120 -0.000014937 0.000014605 0.000013793 0.000006417 0.000000601 -0.000020947 0.000015983 0.000022911 0.000008674 -0.000000911 -0.000001773 0.000006307 0.000007661 0.000004323 0.000001254 0.000004179 0.000006659 0.000005454 0.000003610 0.000001436 -0.000109066 0.000018037 0.000043869 0.000027554 -0.000004886 -0.000036119 0.000011698 0.000053649 0.000012600 -0.000000734 0.000009138 -0.000084259 -0.000103518 -0.000072396 -0.000008558 0.000025795 -0.000026959 -0.000053955 -0.000024843 -0.000003535 0.000001444 -0.000042326 -0.000022394 -0.000021997 -0.000004224 -0.000018425 0.000018529 -0.000015972 0.000005679 -0.000000381 0.000018986 -0.000043788 -0.000043130 -0.000007963 -0.000000812 0.000024832 0.000012985 -0.000002311 0.000008963 0.000002501 -0.000019155 0.000077969 0.000075528 0.000035917 0.000004006 -0.000011170 -0.000005618 0.000003675 -0.000001550 -0.000001075 -0.000007349 0.000012580 0.000012603 0.000006273 0.000001419 0.000015806 -0.000000384 -0.000008173 -0.000001732 0.000001163 -0.000062637 -0.000637348 0.000020514 0.000176945 0.000001862 0.000215663 0.000168903 -0.001521201 0.000222498 0.000029203 -0.000051686 -0.000188219 -0.000424999 -0.000615848 0.000001783 0.000047136 0.002947951 0.001691355 -0.004166236 0.000006348 -0.000099709 0.003991527 -0.002289277 0.002047942 -0.000014007 0.000034746 -0.002823226 0.003262080 0.006222793 0.000004389 0.000038030 -0.000151534 0.000020449 0.000234348 -0.000000704 -0.000101875 0.000334787 0.001046882 0.000071741 -0.000013531 0.000022559 0.000212049 -0.000036379 -0.000394125 -0.000005659 0.000004714 0.000024838 0.000379223 -0.000059682 0.000000244 -0.000004414 0.000074721 -0.000228512 0.000111167 0.000001812 0.000001476 -0.000061561 0.000297640 0.000072735 -0.000002492 0.000002075 0.000074693 0.000018294 0.000011796 0.000000342 0.000029620 0.000074983 0.000014664 0.000027313 0.000006602 0.000003925 0.000058615 0.000030854 0.000061394 0.000002962 -0.000015557 0.000043800 0.000013113 -0.000008495 -0.000002710 -0.000023904 0.000037660 0.000038488 0.000016294 -0.000001601 -0.000003162 0.000005179 0.000010272 0.000038315 0.000000793 -0.000046746 0.000748035 -0.000552400 0.000244493 0.000000168 0.000048905 -0.000439790 -0.000387205 -0.000214126 -0.000000214 -0.000034218 0.000527150 -0.000283404 0.000586753 -0.000004676 0.000006618 0.000106797 0.000131998 0.000468307 0.000005499 -0.000080209 0.000307192 -0.000326372 0.000104104 -0.000007941 -0.000002231 0.000389449 -0.000070242 -0.000349836 -0.000000835 0.000019351 -0.000021280 -0.000040626 -0.000117992 0.000001306 -0.000009159 -0.000007571 0.000001167 0.000037330 -0.000002668 0.000019631 -0.000100341 -0.000007895 0.000087551 0.000006690 0.000000671 0.000049255 -0.000054619 0.000055796 -0.000001195 -0.000025359 0.000124142 -0.000002564 0.000063726 -0.000003141 0.000005213 0.000038992 -0.000043210 -0.000018866 0.000002712 0.000080905 0.000019635 -0.000002482 0.000002502 -0.200479296 -0.000008564 0.000031435 0.000027479 0.000028504 -0.044514917 -0.000083408 -0.000067174 -0.000008234 0.000022244 -0.025466206 0.000000894 -0.000010307 -0.000011150 -0.000001275 -0.001004899 -0.000053576 -0.000025162 -0.000008015 -0.000016850 0.000091726 0.000019684 0.000009190 0.000001877 0.000006040 -0.000672915 0.000014300 0.000023134 0.000007457 -0.000007109 -0.013468220 -0.000008759 0.000009941 0.000001969 -0.000004550 -0.002581668 0.000001728 -0.000014649 -0.000005683 -0.000005005 -0.003201761 -0.000061214 -0.000045890 -0.000006147 -0.000008484 -0.019801693 0.000018354 -0.000000383 -0.000004666 0.000006043 -0.007268700 -0.000000785 0.000011789 -0.000000548 0.000002074 -0.005276559 0.000089967 0.000179393 -0.000000515 -0.000046203 -0.135397346 0.000081212 -0.000303249 0.000183782 0.000073630 -0.028052184 -0.000163098 -0.000152478 0.000054859 0.000081830 0.071218184 -0.000090079 -0.000142527 0.000006178 0.000011504 0.000595957 0.000122957 0.000378737 -0.000148229 -0.000141255 -0.001487024 -0.000012122 0.000035893 0.000044779 0.000048761 -0.001293231 -0.000223953 0.000058537 0.000000883 0.000066149 -0.012215301 -0.000254549 -0.000025788 0.000022339 0.000027065 -0.007217942 0.000238761 0.000024532 0.000009937 -0.000033834 0.024674772 0.000073692 -0.000019582 -0.000071615 -0.000003443 0.003459757 -0.000062216 -0.000136499 -0.000004312 0.000051212 0.002137608 0.000046925 -0.000015007 0.000001078 0.000050847 -0.006471826 0.261375693 0.153525386 0.633490741 -0.021813496 -0.021538879 0.664597849 -0.108654072 -0.132170646 0.200583153 0.394544173 -0.075098977 -0.283829551 -0.041122503 0.207596285 0.676871544 -0.063924990 -0.021202394 -0.302857922 -0.138972232 -0.045235978 -0.036317179 -0.020507841 -0.151230798 -0.143792864 -0.041547410 -0.029043702 -0.004832338 -0.070758837 -0.060301725 -0.105387849 0.026948388 0.009175884 -0.055104431 -0.036916223 -0.023626367 0.010426165 0.002944204 -0.027188900 -0.024952367 -0.007953892 -0.006009374 -0.000503601 -0.000219783 0.002551500 -0.000314933 -0.003408063 -0.001388617 0.007774580 0.005079966 0.005218151 -0.001328398 -0.000567232 0.004714676 0.003030865 0.002097179 0.001062169 0.000275534 -0.000936707 -0.001407378 -0.001701801 -0.003765931 -0.001054782 0.007044567 0.008515290 0.005432266 -0.000750065 -0.000001054 0.002492191 0.003232918 0.001197238 0.000720947 0.000020354 -0.000975993 -0.001650104 -0.000871632 -0.003561597 -0.001237356 0.006398251 0.002282264 0.002304759 -0.001537670 -0.000397240 0.004462161 0.001764603 0.000325906 0.000079474 -0.000057828 0.001086867 0.000303821 0.000116217 0.029391768 0.019012165 -0.216654611 -0.026845844 0.092641635 0.004884719 -0.022466561 -0.004921486 -0.075315246 -0.030756947 -0.035454761 -0.045920717 0.134589883 -0.017347802 -0.209637194 -0.002597811 0.002616654 0.003458061 0.016935416 0.031075970 0.007704131 0.000225563 0.013160298 -0.002094428 -0.008694207 0.010800880 0.006251320 0.026359193 -0.012553430 -0.057539480 0.000586697 0.000238336 -0.000318517 -0.000148930 -0.000066870 -0.000686790 -0.000096736 0.000813434 0.001057940 0.001072155 -0.000144815 -0.000208703 0.000393098 0.000254562 -0.000029386 -0.000052332 0.000010052 -0.000012371 0.000128768 -0.000220083 -0.000489074 -0.000183693 0.001096823 0.000674472 0.000552350 0.000890312 0.000224233 -0.002795364 -0.001796934 -0.001868324 0.000116038 0.000026310 -0.000370820 -0.000136768 -0.000283772 0.000562872 0.000228196 -0.000727617 -0.000776193 -0.000243091 -0.000618712 -0.000205657 0.001160381 0.001182758 0.000944405 0.000362063 -0.000004243 -0.000476859 -0.000639869 -0.000386121 -0.000209026 -0.000107161 0.000177202 0.000313960 0.000225497 -0.000097161 -0.000118952 0.000142619 0.000184082 0.000137945 -0.000568456 -0.000132217 0.001148071 0.001473045 0.000836046 0.001006909 0.000366243 -0.001503406 -0.002289088 -0.001479690 -0.000305754 -0.000102274 0.000879263 0.000729135 0.000562906 -0.000081748 -0.000016065 -0.001048882 -0.000318898 0.000104329 -0.000434320 -0.000233519 0.000671504 0.000392603 0.000419076 -0.000134081 0.000128257 0.000468398 0.000194143 0.000181725 0.000340867 0.000162999 0.000109541 -0.000271092 -0.000695248 0.000234844 0.000037019 -0.000578149 -0.000290581 -0.000041299 0.000324788 0.000066883 -0.000312006 -0.000447373 -0.000302837 -0.000155551 -0.000073003 0.000200243 0.000317114 0.000429491 -0.000739098 -0.000211593 0.001632171 0.000635716 0.000219297 -0.000745959 -0.000229938 0.001955562 0.000484543 0.000306558 0.000155537 0.000064889 -0.000246646 -0.000122318 -0.000184632 0.000619230 0.000284278 -0.000266230 -0.000669777 -0.001116685 0.000367759 0.000128274 -0.000827792 -0.000340135 -0.000291964 -0.000041293 -0.000363195 -0.000946602 -0.000769257 0.002679019 -0.001655658 -0.000409532 -0.001029570 0.002116131 0.002747176 -0.002343740 -0.000782861 -0.008176496 0.000290168 0.003843922 0.000593402 0.000248379 -0.000087286 -0.001834367 -0.003459038 -0.000028236 -0.000420807 -0.001868203 -0.001449236 -0.002207921 -0.000589494 -0.000906837 -0.003873148 -0.002192581 -0.002187998 -0.000369100 -0.000102872 0.000411696 0.001437230 0.001627067 -0.000739431 -0.000498116 -0.006089140 -0.001242825 0.003156161 -0.001017868 -0.001593933 -0.005459313 -0.002135327 0.005498750 0.000023046 0.000009077 -0.000156024 -0.000104354 -0.000037350 -0.000097892 -0.000060274 -0.000059826 -0.000000468 0.000091744 -0.000123600 -0.000019184 0.000219212 0.000221679 0.000191847 0.000114294 0.000051573 -0.000001414 -0.000072190 -0.000133021 0.000123910 0.000080289 -0.000076789 -0.000090046 -0.000124444 -0.000188148 -0.000075258 0.000211805 0.000227342 0.000220282 -0.000140442 -0.000060279 0.000161651 0.000171315 0.000165887 -0.000232013 -0.000086736 0.000174115 0.000228325 0.000286980 0.000171273 0.000088493 -0.000097732 -0.000147243 -0.000189838 -0.000002826 0.000015905 0.000012493 0.000036996 0.000041281 -0.000026000 0.000022124 -0.000090506 -0.000011883 0.000055463 -0.000194233 -0.000125387 0.000241615 0.000212059 0.000184162 -0.000029619 -0.000013185 0.000119266 0.000074586 0.000027621 0.000157042 0.000031830 -0.000072899 -0.000149407 -0.000214805 0.000035639 0.000005259 -0.000103304 -0.000072812 -0.000035191 -0.000117399 -0.000038752 0.000151882 0.000149975 0.000151859 0.000128626 0.000055848 -0.000198496 -0.000176793 -0.000150108 0.000074912 0.000004135 0.000062973 -0.000036737 -0.000125042 -0.000133806 -0.000034032 -0.000022277 0.000090031 0.000178307 -0.000074465 -0.000037499 0.000060167 0.000065537 0.000081266 -0.000073009 -0.000007919 0.000018268 0.000077270 0.000109889 -0.000144659 -0.000067310 0.000021270 0.000099686 0.000174916 -0.000025794 -0.000009777 0.000104445 0.000062018 0.000027583 -0.000169208 -0.000053493 0.000004585 0.000109331 0.000210434 -0.000272432 -0.000293270 0.000819080 0.000572501 0.000226739 -0.001715410 -0.000857701 0.001793005 0.002043834 0.002243669 -0.000446570 -0.000076080 -0.000720604 0.000037544 0.000809797 0.000071373 0.000022880 -0.000096350 -0.000093416 -0.000096594 -0.000040139 -0.000022771 0.000067259 0.000060196 0.000048665 0.000065788 0.000026740 -0.000136169 -0.000104712 -0.000076541 0.000089095 0.000035845 -0.000131908 -0.000121702 -0.000111704 0.000023918 0.000012264 -0.000007982 -0.000017472 -0.000026948 0.000008742 0.000004820 -0.000022156 -0.000009467 -0.000002266 -0.000031350 -0.000013618 -0.000204402 -0.000279609 -0.000242242 -0.000181894 -0.000057480 0.000228175 0.000193940 0.000109851 -0.000030639 -0.000060991 0.000090717 0.000205619 0.000123537 0.000189267 0.000106816 0.000105393 0.000094123 -0.000008424 -0.000069254 0.000018697 0.000148022 0.000178420 0.000169889 0.000028532 -0.000204702 -0.000008362 0.000077687 0.000151492 0.000378800 0.000071248 -0.000262727 -0.000337577 -0.000440604 -0.000066952 0.000016562 -0.000248535 -0.000314177 -0.000184730 -0.000029254 0.000037847 -0.000028135 -0.000087660 -0.000073726 -0.000451825 -0.000061236 0.000172491 0.000178119 0.000234371 -0.000020322 0.000024675 -0.000002470 -0.000026324 0.000010592 0.000037992 -0.000005680 -0.000046645 -0.000032112 0.000020666 -0.000024468 -0.000010862 -0.000047008 -0.000013360 0.000041262 0.000455340 0.000089544 -0.000154202 -0.000214314 -0.000326662 0.000139217 0.000011653 -0.000057054 -0.000038710 -0.000061044 0.000023678 0.000002136 0.000112748 0.000071669 0.000050647 0.000235244 0.000073609 -0.000150360 -0.000101150 -0.000090751 -0.000097015 -0.000029545 0.000145276 0.000069019 0.000031446 -0.000096707 0.000037885 0.000028155 -0.000074306 -0.000026775 -0.000152050 -0.000032531 0.000074428 0.000175246 0.000140418 -0.000142996 -0.000097917 0.000006690 -0.000065906 -0.000049378 -0.000169323 0.000162203 0.000767636 0.000899205 0.000465775 -0.001736257 -0.000814573 0.000867202 0.001234077 0.001915232 -0.000302984 -0.000350931 -0.000017790 -0.000285984 0.000176072 -0.000078861 -0.000028138 0.000032876 0.000053440 0.000075450 -0.000068943 -0.000028763 0.000019085 0.000050969 0.000079854 0.000254275 0.000109590 -0.000063615 -0.000174710 -0.000294776 -0.000014363 -0.000009428 0.000007741 0.000004523 0.000009495 -0.000037514 -0.000019255 0.000015766 0.000043618 0.000067807 0.000035113 0.000005605 0.000033957 0.000002169 -0.000030474 -0.000242607 -0.000012351 -0.000165985 0.000102575 0.000426280 0.000781082 0.000352149 -0.000710725 -0.000878683 -0.001047762 0.000472567 0.000155886 0.000182761 -0.000287162 -0.000737578 0.000580973 0.000371629 -0.000785628 -0.000790741 -0.000715812 0.000945307 0.000474152 -0.000887715 -0.001077680 -0.001238421 0.000244290 0.000082368 0.000176879 -0.000115181 -0.000380264 -0.000183375 -0.000163156 -0.000173887 -0.000086412 0.000160979 0.001315637 0.000672148 -0.000525788 -0.000754047 -0.001357391 0.000189986 0.000166350 -0.000059355 0.000151555 -0.000018704 -0.000098507 -0.000153940 -0.000420843 -0.000469965 -0.000158193 0.000660365 0.000307886 -0.000325872 -0.000491378 -0.000694409 -0.000101220 0.000232987 0.000182189 0.000519200 0.000266316 -0.000001780 -0.000007227 0.000072738 0.000028520 -0.000006512 -0.000000685 0.000002866 0.000013229 0.000010511 0.000005462 -0.000000206 -0.000003450 0.000011636 -0.000003843 -0.000008301 0.000006397 0.000022354 -0.000134652 -0.000047843 0.000013462 -0.000007950 0.000007263 -0.000002588 0.000025060 0.000033706 -0.000008919 -0.000008455 0.000019194 -0.000005021 -0.000013313 -0.000000935 0.000001239 -0.000076921 -0.000036811 -0.000001206 0.000011760 0.000003392 0.000001652 -0.000009136 -0.000016610 0.000008545 0.000005093 -0.000052464 -0.000028299 -0.000008889 -0.000005255 -0.000007458 0.000038493 0.000019041 0.000004195 0.000010524 0.000003996 0.000017461 0.000002113 -0.000011621 0.000006147 0.000000836 -0.000037245 -0.000027871 -0.000014950 0.000000926 -0.000002421 0.000005653 -0.000001494 -0.000005082 -0.000011934 -0.000004189 -0.000002548 0.000008439 0.000016272 -0.000007199 -0.000004483 0.000026752 0.000014548 0.000005730 -0.000000129 -0.000002133 0.000029721 0.000010156 -0.000004574 -0.000010029 -0.000004413 0.000013722 0.000013016 0.000011862 -0.000004669 -0.000001763 -0.000004852 0.000001361 0.000006353 -0.000007011 -0.000011489 0.000085068 0.000036118 -0.000000624 0.000016912 0.000002914 -0.000010579 -0.000023158 -0.000027600 0.000014036 0.000010271 0.000000505 0.000002277 -0.000004273 -0.000002407 0.000002849 0.000021759 0.000018011 0.000008942 0.000013682 0.000006728 0.000000728 -0.000008153 -0.000016131 0.000007685 0.000001600 -0.000006733 -0.000008573 -0.000008654 0.000003557 0.000004024 -0.000019598 -0.000006978 0.000001255 -0.000016525 -0.000004642 0.000003505 0.000016628 0.000023964 -0.000011026 -0.000008077 0.000016393 0.000007662 0.000004817 0.000000516 -0.000000534 0.000009982 0.000004811 0.000000401 -0.000011273 -0.000005504 0.000020985 0.000017309 0.000014046 -0.000004205 -0.000000167 -0.000018613 -0.000004299 0.000006205 0.000038592 0.000008257 -0.000048952 -0.000070083 -0.000069556 -0.000052915 -0.000008688 -0.000076268 0.000001072 0.000064092 0.000001603 -0.000007160 -0.000017621 -0.000016422 -0.000008476 -0.000036938 -0.000011821 -0.000011331 0.000028296 0.000048874 0.000066700 0.000016156 -0.000034131 -0.000061568 -0.000075199 0.000022386 0.000008284 -0.000035221 -0.000042934 -0.000039515 -0.000026845 -0.000004425 0.000007529 0.000036183 0.000046371 0.000040312 0.000010704 0.000019189 -0.000023237 -0.000053469 0.000028193 0.000017093 -0.000061878 -0.000036478 -0.000021977 -0.000003098 -0.000000219 0.000008779 0.000005044 0.000003997 0.000049598 0.000016415 -0.000043510 -0.000073065 -0.000077766 0.000039031 0.000016281 -0.000047767 -0.000050813 -0.000046109 0.000031372 0.000011735 -0.000049793 -0.000048443 -0.000041467 -0.000017547 -0.000006565 -0.000013596 0.000004297 0.000019920 -0.000020740 -0.000008717 0.000025739 0.000021291 0.000017921 0.000024402 0.000008315 -0.000008332 -0.000026867 -0.000036995 0.000012534 0.000002572 0.000001047 -0.000014205 -0.000023770 -0.000016518 -0.000006682 0.000028996 0.000022819 0.000015611 0.000008268 -0.000002870 0.000057390 0.000004544 -0.000027803 -0.000016777 0.000002303 -0.000030338 0.000012194 0.000034107 0.000051949 0.000016447 -0.000009692 -0.000054378 -0.000073308 -0.000006022 -0.000005050 0.000012574 -0.000002019 -0.000008917 0.000054918 0.000014318 -0.000035029 -0.000064442 -0.000076461 0.000036836 0.000012522 -0.000027685 -0.000049502 -0.000054079 0.000004341 0.000003147 -0.000028938 -0.000012866 0.000000479 -0.000001069 -0.000000483 -0.000003169 0.000006010 0.000009898 -0.000041036 -0.000015346 0.000019988 0.000040276 0.000046732 0.000017895 0.000007037 -0.000018036 -0.000022161 -0.000020502 0.000018474 0.000005302 0.000021253 -0.000012356 -0.000032468 -0.000023139 -0.000008894 0.000017130 0.000026367 0.000029164 -0.053718738 -0.024644317 -0.004585053 -0.001777750 -0.009241343 -0.075847816 -0.010878373 -0.018233552 -0.014958706 -0.012936324 -0.016123573 -0.094100777 -0.027697185 -0.005083517 -0.003994715 -0.020900617 -0.022867844 -0.005677141 -0.002427858 0.000900819 -0.005320427 -0.005511823 -0.001624151 -0.000569696 0.000282816 -0.002641324 -0.005212823 0.000119497 -0.000779603 -0.000641658 -0.008063637 0.025326023 -0.001037576 -0.000105056 0.001904561 -0.004440735 0.006956595 -0.002174528 0.001079394 0.002488840 -0.003198044 0.008564799 0.000814924 -0.001070276 -0.000153477 0.016763479 -0.014662003 -0.001074088 0.004142387 0.004359317 0.010758407 -0.005320666 -0.001257927 0.002049161 -0.001290266 0.002498621 -0.003926510 -0.001795101 0.001940521 0.001547967 -0.024119297 0.057614646 0.005095097 0.007212365 0.008119371 -0.068187143 0.020329900 0.012437368 -0.001578942 -0.015845548 0.014777853 -0.170215911 0.013898210 0.002893383 -0.030764349 -0.019083659 0.009781144 0.000854371 -0.001676772 -0.001139912 -0.000940739 0.004332798 -0.001718275 0.000151912 -0.003951792 0.021553305 -0.012945760 0.001590983 0.005082683 0.001539225 -0.000281509 0.000916691 -0.001698553 -0.002119618 -0.001038667 -0.002943716 -0.003859941 0.001223934 0.002300182 0.001028531 -0.002062419 0.007911147 0.001696158 -0.000491377 -0.000302601 0.012332496 0.016747869 -0.003582335 -0.001892132 0.002299394 0.004962836 0.008471531 -0.001768254 -0.000055216 0.000559829 -0.012754441 -0.018971333 0.003068267 0.001016538 -0.002630336 0.541701895 0.292872567 0.222367098 0.051655014 0.056741438 0.120186664 -0.088300809 -0.038888542 0.018811018 0.327987169 -0.044656163 -0.050748871 0.014889673 -0.029852315 0.357309746 0.011943629 0.010943563 -0.025933343 0.008494584 -0.012355581 -0.009440103 -0.013900240 0.010209229 -0.040632000 0.009535575 -0.006084911 -0.005262304 0.007006380 0.007007250 -0.072562325 0.001503211 0.001873794 0.003298870 -0.007349651 0.049173936 -0.024645556 -0.000282663 -0.002811223 -0.106975848 0.068567429 -0.013885763 0.003919996 -0.001167113 0.073104754 -0.110149773 0.005282827 0.000720305 0.003349234 -0.013411018 0.009955039 -0.015776556 -0.018918500 -0.009213017 -0.037950993 0.008069922 -0.011119949 -0.008453647 -0.005795108 0.005292263 -0.091828264 0.001164826 0.001495965 0.002609517 -0.000574871 -0.062103679 -0.083025114 -0.033515271 0.028993003 0.007669530 0.008309697 -0.037395074 0.004569622 0.014326873 0.002278281 0.003294147 0.015530736 0.007225985 0.012093191 -0.000440105 -0.005705943 -0.001997638 0.002495819 0.003852673 -0.000636562 -0.000203052 -0.004472873 -0.006091816 0.001877223 0.000168403 0.002662241 -0.014421524 -0.007109579 -0.003556216 0.003155685 0.003867022 0.000275174 0.000061272 -0.000217309 -0.001063793 -0.002806059 -0.001213405 -0.001731200 -0.000744003 -0.003131914 0.011698642 -0.000302498 0.000558536 0.000810899 0.003214094 -0.012485669 0.000845441 0.000136412 -0.000224607 -0.001068087 0.000685411 -0.001205575 -0.000957175 0.001258172 -0.007350990 -0.007248250 0.003778477 0.004492470 -0.003229193 0.014005991 0.012473822 0.001087034 0.000436728 -0.000216766 -0.000985041 -0.002320301 -0.000098319 0.001255183 -0.000802855 0.009750412 -0.005766413 -0.000589377 -0.002431184 0.001094573 -0.018824882 0.007578135 0.001281244 -0.000338564 0.001393536 -0.000324424 0.004607675 -0.000772656 0.000040265 -0.000876872 -0.002576301 -0.004887098 -0.000727426 -0.000362051 0.000411356 0.002401410 -0.001065790 -0.003757065 0.000180759 -0.000414611 -0.011887956 -0.008950421 0.006502693 0.000548840 0.000961056 0.010357379 0.008378433 -0.002581493 0.000085428 0.000399153 -0.001071122 -0.002712040 0.002048854 -0.001110377 -0.000469911 0.001908034 0.012700909 -0.001011809 0.000841421 0.000685519 -0.005334030 -0.009782171 -0.000125559 0.000065158 -0.000124116 0.002178402 0.002760936 0.000011494 0.000184643 0.000438047 -0.001665692 -0.000212666 0.001412623 0.000882473 0.001023307 0.000319093 0.007785120 0.000756764 0.000031379 0.001622271 0.000924719 0.012403914 0.000801168 0.000306650 0.000140370 -0.001173572 0.001060428 -0.003738902 -0.002965736 -0.001874945 -0.010799181 -0.005033108 -0.004254368 -0.004553214 -0.001693646 -0.013857594 -0.005002938 0.000862195 0.000573074 0.000309458 -0.000625495 -0.002721025 -0.000413049 0.001508587 0.000502292 0.011228027 -0.008050220 0.000647521 0.001831949 0.000325840 0.014680253 -0.009934002 0.000457434 0.000248007 0.001542583 -0.000097941 -0.000093296 0.000029974 -0.000320483 -0.001782403 -0.000436820 -0.000009368 0.001882215 0.001041830 0.000778421 0.000546785 0.000078754 0.000081207 0.000558610 0.002023562 0.000631646 0.000270054 -0.000230117 0.001162917 0.001086275 0.000432344 -0.000207476 0.000064613 0.000370384 0.001417615 0.000026191 -0.000138808 -0.000272864 -0.000098758 -0.000260158 -0.000631764 0.000352175 0.001328587 0.002210896 0.001816362 0.000531044 -0.000533179 0.001998854 0.000460822 -0.000676238 0.000229879 -0.000279727 0.000294945 0.000075988 0.000032185 -0.000308126 0.000231968 0.000145550 -0.000067492 0.000052696 -0.000203365 0.000579236 -0.000489549 -0.000150640 -0.000150114 0.000695503 -0.000272308 0.000049161 0.000082106 -0.000004780 0.000056471 -0.000272200 0.000088546 0.000163109 -0.000025080 0.000022036 -0.000505855 -0.000426224 -0.000174521 -0.000034875 0.000367312 -0.000121279 -0.000324484 -0.000142720 -0.000039226 0.000229854 -0.000003963 -0.000397305 -0.000122814 -0.000081545 0.000375944 -0.000363249 0.000204975 0.000178979 0.000016457 -0.000127547 -0.000301282 -0.000090921 -0.000020356 -0.000032397 0.000019053 -0.000042836 0.000070516 0.000042232 -0.000079781 -0.000097135 -0.000032597 -0.000354398 -0.000272860 0.000058917 0.000384382 0.000341512 -0.000199111 -0.000050880 0.000002748 0.000336801 -0.000196327 0.000224811 0.000079749 0.000093085 -0.000198710 0.000119379 0.000203624 -0.000000436 0.000005206 -0.000386819 0.000389280 -0.000274065 -0.000141424 -0.000072216 0.000437365 0.000066897 0.000381578 0.000102699 0.000036050 -0.000514702 0.000357819 -0.000014184 0.000007194 0.000096120 0.000058318 -0.000072554 -0.000057999 -0.000051562 -0.000054527 -0.000019742 0.000077816 -0.000102606 -0.000058695 -0.000003980 0.000096527 0.000017714 -0.000103027 -0.000043105 -0.000056824 0.000119004 -0.000026016 -0.000091089 -0.000088665 -0.000020921 0.000005230 0.000140624 -0.000155374 -0.000046946 -0.000014255 0.000255155 -0.000109049 -0.000093103 -0.000058841 -0.000058209 0.000034766 0.000027431 -0.001232211 -0.000817161 0.000239069 0.001327786 0.000744452 -0.003258931 -0.001973123 -0.000561689 0.003208550 0.001050083 0.000744267 0.000149004 -0.000503414 -0.001501060 0.000713338 0.000173119 0.000093954 0.000058104 -0.000203291 -0.000043388 -0.000110641 -0.000092872 -0.000013425 0.000071132 0.000173977 0.000224616 0.000120963 0.000035574 -0.000302685 -0.000068733 0.000231890 0.000148868 0.000044839 -0.000288193 -0.000202685 0.000016242 0.000028281 -0.000000060 -0.000017401 -0.000096606 0.000023983 0.000008240 -0.000014466 -0.000060196 0.000001969 0.000450263 0.000300392 0.000080128 -0.000393983 -0.000346049 -0.000246804 -0.000274965 0.000065790 -0.000046815 0.000611409 -0.000163988 -0.000162609 -0.000031628 0.000063221 0.000225371 -0.000205592 -0.000144136 -0.000021400 0.000213245 0.000235475 -0.000294277 -0.000175199 -0.000063901 0.000315544 0.000127932 -0.000085192 -0.000039451 -0.000048196 0.000101808 -0.000027204 0.000564759 0.000378911 0.000062183 -0.000402937 -0.000330947 0.000476001 0.000319792 0.000109329 -0.000504520 -0.000332389 0.000093217 0.000059321 0.000037737 -0.000097598 -0.000047466 -0.000282195 -0.000210798 -0.000017101 0.000176135 0.000197937 -0.000003810 0.000028346 -0.000002752 0.000067441 -0.000124218 0.000054254 0.000054547 -0.000003270 -0.000032410 -0.000088312 0.000058050 0.000038522 -0.000000042 -0.000074880 -0.000039690 0.000314807 0.000227130 0.000042633 -0.000201658 -0.000199962 0.000090724 0.000059633 0.000000171 -0.000062506 -0.000025825 -0.000179731 -0.000115227 -0.000001368 0.000123266 0.000185313 0.000169136 0.000142804 -0.000040685 -0.000015416 -0.000287458 -0.000152896 -0.000127064 0.000053480 0.000035423 0.000241506 -0.000007102 -0.000004520 0.000047541 -0.000071482 -0.000014426 -0.000167104 -0.000158030 -0.000047498 0.000107463 0.000204012 0.000075087 0.000053896 0.000072514 -0.000143266 -0.000076681 -0.001650081 -0.001201518 -0.000359132 0.001562346 0.001161222 -0.001734672 -0.001141985 -0.000077602 0.000933427 0.000954758 0.000328549 0.000328160 0.000342033 -0.000636486 -0.000408533 -0.000076879 -0.000051334 -0.000013663 0.000053394 0.000032818 -0.000053297 -0.000037109 -0.000011854 0.000030401 0.000030660 0.000182627 0.000129152 0.000043062 -0.000094199 -0.000119869 -0.000006426 -0.000005401 0.000005853 -0.000007263 0.000013527 -0.000054461 -0.000030307 -0.000019306 0.000058426 0.000006964 -0.000041016 -0.000007432 -0.000001248 0.000085588 -0.000044284 0.000092325 0.000079876 -0.000319956 -0.000245128 -0.000186728 0.001323283 0.000814336 0.000344650 -0.001260085 -0.000460878 0.000010057 0.000157913 0.000316801 0.000360059 -0.000470179 0.001320729 0.000884808 0.000042018 -0.001311805 -0.000739033 0.001661688 0.001069819 0.000302272 -0.001431448 -0.000881964 -0.000099990 0.000055690 0.000149760 0.000352496 -0.000333444 0.000308094 0.000236714 0.000065830 -0.000365002 -0.000250969 0.000979847 0.000626685 -0.000022220 -0.000380733 -0.000522445 -0.000150178 -0.000141744 -0.000185261 0.000282768 0.000131119 0.000963447 0.000691003 0.000217332 -0.000934042 -0.000616128 0.000694967 0.000488850 0.000073474 -0.000401674 -0.000444370 -0.000642053 -0.000531539 -0.000325656 0.000757140 0.000584876 -0.000098257 -0.000030548 0.000007969 0.000170981 -0.000059051 -0.000032052 -0.000000117 -0.000011223 0.000077716 -0.000058169 0.000001111 -0.000010096 0.000014961 -0.000030509 0.000045111 0.000157776 0.000079386 -0.000033849 -0.000222531 -0.000032043 -0.000048997 0.000012402 -0.000045740 0.000135987 -0.000147378 0.000011786 -0.000026070 0.000036597 -0.000089515 0.000128002 0.000120927 0.000032937 0.000012859 -0.000212501 0.000083363 0.000006306 0.000008057 0.000005450 -0.000004075 -0.000019599 0.000077872 0.000030919 0.000004380 -0.000107296 0.000018763 -0.000054120 -0.000020696 0.000002822 0.000088843 -0.000018704 -0.000026240 0.000001854 -0.000002788 0.000066128 -0.000051226 0.000072772 0.000017542 0.000019214 -0.000129266 0.000062779 -0.000000518 -0.000002229 0.000007838 -0.000001430 0.000007195 -0.000003066 -0.000007671 -0.000004297 -0.000007417 0.000021501 -0.000037021 -0.000018426 0.000000870 0.000042813 0.000004997 -0.000036256 -0.000015333 0.000004227 0.000046939 -0.000004147 -0.000023205 -0.000013868 -0.000002436 0.000022616 0.000010204 0.000005229 -0.000001912 -0.000000695 -0.000015614 0.000015527 -0.000110693 -0.000048407 0.000010453 0.000157296 -0.000010007 0.000034761 0.000015203 0.000016221 -0.000048068 0.000006477 -0.000022362 0.000016230 -0.000023449 0.000092724 -0.000099570 -0.000049287 -0.000005178 -0.000017700 0.000100992 -0.000068271 -0.000000408 0.000012751 -0.000002069 0.000027122 -0.000046504 0.000014264 0.000005431 0.000003129 -0.000015541 0.000007260 0.000020779 0.000012880 -0.000006434 -0.000016590 -0.000012146 -0.000017585 -0.000012566 -0.000008869 0.000013289 0.000012756 -0.000010342 -0.000020616 0.000013872 -0.000024992 0.000059114 -0.000015911 -0.000004104 -0.000001848 0.000028194 -0.000012352 -0.000034383 -0.000018849 -0.000003330 0.000037164 0.000009564 0.000023548 0.000006522 -0.000000801 -0.000037784 0.000014698 0.000115330 0.000056029 0.000030805 -0.000140489 0.000010211 0.000092203 -0.000007301 -0.000011810 -0.000237830 0.000193766 0.000043827 0.000004807 0.000013330 -0.000094060 0.000057366 -0.000000379 -0.000021991 -0.000006657 -0.000031670 0.000072509 0.000066804 0.000067721 -0.000001364 0.000001845 -0.000129248 0.000069980 0.000041703 0.000016357 -0.000075991 -0.000027070 -0.000046292 -0.000020851 -0.000032650 0.000083272 -0.000000165 -0.000010944 0.000023582 0.000003715 0.000084859 -0.000097073 0.000068058 0.000068913 -0.000023027 -0.000002994 -0.000150351 -0.000016513 -0.000008558 -0.000006169 0.000030149 0.000017287 0.000098040 0.000067815 0.000023613 -0.000100005 -0.000072478 0.000073262 0.000063720 0.000000306 -0.000034677 -0.000109560 0.000084418 0.000057756 0.000009655 -0.000088607 -0.000081069 0.000019453 -0.000011120 0.000001781 -0.000071913 0.000075411 -0.000032594 -0.000033232 0.000005586 0.000006835 0.000073640 0.000027437 0.000028206 0.000012989 -0.000007253 -0.000057331 0.000014148 0.000011880 0.000014906 -0.000011561 -0.000022782 -0.000040393 -0.000031150 0.000001318 0.000026999 0.000048740 -0.000045947 -0.000034712 0.000030696 0.000011325 0.000059096 0.000007373 0.000011658 -0.000035010 0.000037188 -0.000026168 0.000045007 0.000043402 0.000020144 -0.000017264 -0.000064072 0.000004223 -0.000012871 0.000019544 -0.000050177 0.000057766 0.000079044 0.000069608 0.000020167 -0.000037323 -0.000122954 0.000061360 0.000046985 0.000015376 -0.000045433 -0.000055373 0.000034900 0.000020283 -0.000005601 -0.000035601 -0.000017226 -0.000006460 -0.000000266 -0.000009124 0.000019696 -0.000012692 -0.000034304 -0.000043422 0.000001458 -0.000019722 0.000083589 0.000029102 0.000024147 0.000000926 -0.000016420 -0.000034570 -0.000012203 0.000003211 0.000013668 0.000031276 -0.000022643 -0.000030650 -0.000030944 -0.000003693 0.000003106 0.000057431 0.001882809 0.000755299 0.002746353 -0.000538192 -0.000427109 0.002914130 0.006315357 -0.004600878 -0.001755193 -0.000476515 -0.002807536 -0.006437503 -0.003035196 0.002133326 0.000670208 -0.000739003 -0.000767606 -0.002049006 0.000427633 0.000291426 -0.000642340 -0.000180326 -0.000667481 0.000321866 0.000215004 -0.000183213 -0.000294714 -0.000091158 0.000204086 0.000075205 0.000394901 0.000539713 -0.000422922 -0.000126346 0.000011819 0.000148823 0.000006459 -0.000414542 -0.000039686 0.000062232 0.000054520 0.000490081 0.000081955 -0.000166417 -0.000060687 -0.002409995 -0.002866188 -0.000146604 0.001185899 0.000734025 -0.000055797 -0.001048623 0.000434769 -0.000001264 -0.000058930 -0.000592231 -0.001046020 -0.000167661 0.000261638 0.000256752 -0.005539540 -0.001386136 -0.002834274 0.002702747 -0.000626898 0.006146293 -0.000006190 -0.000871202 -0.000937209 0.000810078 0.006763229 0.003288054 0.002413674 -0.001356675 -0.000638812 0.000587493 0.000021467 0.000433790 -0.000493350 0.000604222 0.002469004 0.000821612 0.001199732 -0.000636852 -0.000574038 -0.002523887 -0.001542961 0.000812413 -0.000329877 0.000621176 0.001511311 0.000319115 -0.000903429 0.000990301 0.000564588 -0.001799647 -0.001299395 -0.000092117 0.000191957 -0.001036576 -0.000111077 0.000145580 -0.000400459 -0.000939988 -0.002321372 0.000671975 -0.000020538 -0.000775525 0.000229207 0.000799499 0.000288201 0.000431968 0.000132463 0.000223541 -0.000359749 0.000484365 0.000028571 0.000322542 0.000045840 0.000380335 0.363009431 -0.010470824 0.529569212 0.054808986 -0.014917745 0.504067329 -0.145099476 -0.000542718 0.058106558 0.445239637 -0.008893197 0.003863361 0.000396842 0.000786954 0.469717736 0.006033464 0.006212174 -0.000239286 0.000607228 0.049354153 -0.045253262 -0.012521507 0.009411423 0.002364323 -0.014359731 0.001585450 0.004207728 -0.000819094 -0.000768286 0.004482061 -0.059741306 -0.000611319 0.009304275 0.009096861 0.000284228 -0.120523516 0.001306161 -0.012000257 -0.011276528 -0.000588291 0.003443454 -0.001730632 -0.001506382 -0.000459106 -0.001862020 -0.002397621 -0.000011395 0.000045362 0.000578657 -0.001379541 -0.003944624 0.000133269 0.000881229 0.000991888 0.000490834 0.000914770 0.000002720 0.000016667 -0.000143145 0.000102253 0.001794974 -0.000148541 -0.000534950 -0.000441527 -0.000212203 0.002546702 -0.000601631 -0.000796165 -0.000460511 -0.000693637 0.000500683 -0.058856754 0.037067540 0.043441816 -0.000290528 0.007466081 0.034514721 -0.147052175 -0.128354668 0.000006393 -0.014507548 0.045375743 -0.140322008 -0.208106308 0.000149668 -0.000161405 -0.173551541 -0.133452908 -0.000576042 -0.000461972 -0.003962798 -0.139878078 -0.186438215 -0.001687777 0.000673969 0.002918072 0.008493960 0.006732235 -0.038324039 -0.001051933 0.002904933 -0.257476084 0.106367219 -0.036341120 0.000297019 -0.001200140 0.112642141 -0.096734664 0.015047592 -0.000372594 -0.000708218 -0.046912396 0.018816847 -0.047661205 0.000838266 -0.017046671 -0.002519679 0.002328688 0.000512356 -0.039246737 0.015254189 0.003485313 -0.001702565 -0.000480954 -0.000350907 -0.002686312 -0.000030459 0.000002860 0.000501454 -0.007430614 0.002875484 0.001640430 0.000249547 0.000143061 -0.266223486 -0.003790554 -0.001686920 -0.000057653 -0.000070877 -0.095126656 -0.000895313 0.000605631 0.000192467 -0.000196205 0.050819467 0.012282836 -0.000088409 -0.001374837 -0.000448546 -0.039581982 -0.009157815 0.000275093 0.000843846 0.000607219 -0.028512867 0.001933583 0.000148365 -0.000125833 -0.000256119 -0.020771779 -0.000986643 0.000638560 -0.000469581 -0.000289614 -0.000309575 -0.012654667 0.000042320 -0.002568747 -0.002809669 -0.000278736 -0.012587514 0.000437617 -0.003568538 -0.002836570 -0.000509617 0.000984966 0.000001807 -0.000288055 -0.000283636 -0.000311439 0.004122349 0.000810500 0.000004505 0.000155744 0.001237870 0.002359337 0.001084041 0.000889724 0.000441438 0.000878025 -0.001327941 0.000109665 -0.000051003 0.000351478 0.000522612 0.004394900 -0.000927826 0.000811153 0.000565117 -0.000408662 0.002921733 -0.001086136 0.001677731 0.001295117 -0.000950016 0.000151886 0.000038845 0.000012998 -0.000015698 0.000060847 0.000830691 0.000041594 -0.000046441 -0.000129303 0.000050361 -0.000763435 -0.000050965 0.000026835 0.000113521 -0.000096760 -0.000375700 -0.000069765 -0.000025400 0.000050252 -0.000093763 -0.000356080 -0.000025978 0.000034302 0.000083388 -0.000019076 -0.000313722 0.000017396 0.000046597 0.000048193 0.000015994 0.000966259 0.000054535 -0.000081207 -0.000178774 0.000093675 -0.000702304 -0.000021219 0.000107924 0.000126016 0.000002229 -0.000088613 0.000014840 0.000030459 0.000026873 -0.000015983 -0.000110424 0.000063139 -0.000073679 0.000064715 0.000183834 -0.000390298 0.000010995 -0.000083631 0.000094797 0.000307897 0.000526649 -0.000065544 0.000055888 -0.000192243 -0.000405423 0.000152204 -0.000014221 0.000044171 -0.000025335 -0.000443208 0.000187430 0.000017085 0.000056349 -0.000052626 0.000013747 -0.000070583 -0.000072127 0.000028621 0.000018219 -0.000249109 -0.000094245 -0.000088527 0.000047887 -0.000005104 -0.000875974 0.000033273 -0.000094706 0.000075896 -0.000017164 -0.000038714 -0.000110160 -0.000044227 0.000110025 -0.000031803 -0.000846698 -0.000001648 -0.000056153 0.000078782 -0.000082558 -0.002354564 0.000424533 0.000073855 -0.000051192 -0.000089232 0.000938361 -0.000434336 -0.000089484 -0.000030609 0.000109050 -0.000819987 -0.000029782 -0.000021014 0.000027565 0.000010086 -0.000643482 -0.000059703 0.000072359 -0.000067340 0.000077268 0.000676462 0.000081525 0.000067863 -0.000074753 -0.000010918 0.000092822 0.000203663 -0.000031264 -0.000010123 -0.000074517 0.000006493 0.000011963 0.000077832 -0.000054421 -0.000009764 0.000287103 -0.000276274 0.000002114 0.000006445 0.000098546 -0.000128472 0.000122346 0.000030619 -0.000044885 -0.000030123 0.000056683 -0.000082341 -0.000034570 0.000009288 0.000023968 -0.000048256 0.000202417 0.000014828 -0.000020996 -0.000060442 -0.000114247 -0.000009403 0.000007444 -0.000035260 0.000007441 0.000116911 0.000015578 -0.000053028 0.000039157 -0.000012173 -0.000266995 0.000051201 -0.000003987 -0.000014313 -0.000014463 0.000075438 -0.000885432 -0.000209611 -0.000048773 0.000211373 -0.001286642 0.000877505 -0.000507817 -0.000143264 -0.000279986 -0.001429475 0.001752114 0.000369436 -0.000337365 -0.000365163 0.001798970 -0.000196076 0.000026115 0.000006578 0.000056194 0.000051476 0.000065418 0.000001050 -0.000027162 -0.000026184 -0.000010503 -0.000140101 0.000036667 -0.000000999 0.000043343 0.000090155 -0.000139801 0.000025484 0.000016937 0.000058369 -0.000033191 0.000002095 -0.000003146 0.000015023 -0.000001095 -0.000053750 0.000101391 0.000016231 -0.000009457 -0.000025301 -0.000017204 0.000090968 0.000087546 0.000203435 -0.000216614 0.000076765 -0.000572676 0.000105176 -0.000353546 0.000734987 0.000057070 -0.000109224 -0.000018126 -0.000201329 0.000098783 -0.000002464 -0.000155686 -0.000057827 -0.000143925 0.000263558 -0.000036307 -0.000042042 -0.000073141 0.000016004 0.000043543 -0.000071834 0.000091776 -0.000087469 0.000120462 -0.000064448 -0.000027381 0.000261503 0.000064316 0.000098776 -0.000134865 0.000066403 0.000082955 0.000161331 0.000149856 -0.000153214 0.000109018 -0.000038861 0.000066029 -0.000005342 0.000004512 0.000024801 -0.000218298 0.000001505 -0.000037123 0.000088872 -0.000022162 0.000040156 -0.000044957 0.000073343 -0.000097999 -0.000020767 0.000098969 -0.000030715 0.000064977 -0.000071138 0.000002151 0.000043935 0.000028129 -0.000008974 0.000003254 0.000007777 0.000130356 -0.000015162 0.000040896 -0.000060265 0.000031445 0.000067892 0.000015641 -0.000038333 -0.000026646 0.000012385 -0.000124729 -0.000029462 -0.000147225 0.000188570 -0.000017909 0.000328150 -0.000119576 0.000042071 -0.000316992 -0.000018118 -0.000357921 -0.000022795 -0.000089848 0.000111546 0.000019108 -0.000145420 0.000066430 0.000033785 0.000049510 0.000025955 -0.000086641 -0.000016175 -0.000059768 0.000092018 -0.000017954 -0.000119270 0.000064887 0.000054381 0.000015590 0.000039620 -0.000612590 -0.000326390 -0.000358442 0.000523363 -0.000312063 -0.001097882 -0.000085130 -0.000226620 0.000531450 -0.000123695 -0.000420610 0.000202723 0.000156719 0.000048549 0.000171994 -0.000026747 -0.000006430 -0.000004046 0.000011366 -0.000012142 -0.000010987 -0.000002295 -0.000005513 0.000007895 -0.000005625 0.000022256 0.000008547 0.000031437 -0.000020385 0.000013534 -0.000021659 0.000009473 -0.000010373 0.000017825 0.000003413 0.000031491 -0.000022780 0.000011566 -0.000037109 -0.000013147 -0.000014774 -0.000041128 0.000036143 -0.000019529 -0.000023624 0.000932533 0.000054908 -0.000033717 -0.000217820 0.000538869 -0.000797632 0.000179790 0.000098815 0.000213409 0.000206064 -0.000801081 -0.000095269 0.000157993 0.000217334 -0.000360653 0.000096726 0.000194127 0.000099990 -0.000016047 0.000731262 -0.000542837 0.000184930 0.000158073 0.000147866 0.000485866 -0.000427057 -0.000086719 0.000108961 0.000098648 -0.000233160 0.000161929 0.000081271 0.000088551 -0.000148864 0.000076810 0.000728260 -0.000010696 0.000126018 -0.000337692 0.000024704 0.000292528 -0.000089835 -0.000040003 -0.000096974 -0.000082161 0.000316087 0.000192705 0.000184952 -0.000265983 0.000193343 0.000393164 0.000041984 0.000120081 -0.000216822 0.000057140 0.000141158 -0.000200855 -0.000189647 0.000076094 -0.000175644 -0.000086805 -0.000049945 0.000037343 0.000008589 -0.000029080 0.000030513 -0.000015985 0.000019204 -0.000024102 -0.000041542 -0.000066147 0.000004301 -0.000012190 0.000032113 0.000018725 0.000244886 0.000078736 -0.000045407 -0.000049791 -0.000024342 0.000170611 -0.000018767 0.000043981 -0.000086376 -0.000056122 -0.000144771 0.000016828 -0.000048330 0.000087959 0.000061481 -0.000008422 0.000049605 -0.000045467 0.000030249 0.000067413 -0.000016002 -0.000000922 0.000003077 0.000009439 -0.000008547 0.000013983 0.000022576 -0.000014209 0.000002653 0.000033522 -0.000052114 -0.000027850 0.000021036 0.000003759 -0.000006935 0.000004944 -0.000017228 0.000020827 -0.000011508 -0.000024553 -0.000051632 0.000026312 -0.000027964 0.000034933 0.000054112 -0.000038596 -0.000002897 -0.000000697 0.000014320 0.000009358 0.000011944 0.000003537 -0.000005961 -0.000003949 0.000006408 -0.000020051 -0.000009413 0.000001553 0.000006470 -0.000010945 -0.000029671 -0.000011448 0.000004166 0.000010660 -0.000013528 -0.000002260 -0.000003723 -0.000001396 0.000000249 -0.000005357 0.000001835 0.000004206 -0.000005545 0.000001166 0.000007498 -0.000104859 -0.000046349 0.000027135 0.000020342 -0.000016823 -0.000052348 0.000003913 -0.000003770 0.000024496 0.000022189 0.000104480 -0.000019216 0.000038820 -0.000061244 -0.000052254 0.000064585 -0.000018517 0.000024096 -0.000035579 -0.000051491 0.000020860 -0.000008041 0.000016085 -0.000012208 -0.000020496 -0.000010878 0.000001856 -0.000000149 0.000001814 0.000012376 0.000036412 0.000005528 0.000004014 -0.000017432 0.000000846 0.000023111 0.000001612 -0.000004649 -0.000009289 -0.000005424 -0.000070447 0.000004385 -0.000022140 0.000038420 0.000020441 -0.000001107 -0.000007639 0.000007197 -0.000003368 -0.000008274 -0.000006826 -0.000007315 0.000000365 0.000000513 -0.000008597 0.000012047 0.000009596 -0.000007752 -0.000002053 0.000012649 -0.000054163 0.000020060 0.000010475 -0.000011593 0.000051735 0.000102654 0.000143198 -0.000125918 -0.000002024 0.000070171 -0.000044474 0.000012539 -0.000016128 0.000014505 0.000034373 -0.000003859 0.000016713 -0.000001487 -0.000018814 0.000018288 0.000054973 -0.000013822 0.000072343 -0.000116577 -0.000011684 -0.000010898 -0.000005715 0.000021387 -0.000001184 0.000017213 0.000114112 -0.000001229 0.000008335 -0.000071813 -0.000024360 0.000001878 -0.000024592 0.000045296 -0.000043683 -0.000027986 0.000135327 -0.000009875 0.000031076 -0.000065722 -0.000025714 0.000030894 -0.000000406 0.000016891 -0.000027509 -0.000000572 -0.000021214 0.000003612 0.000003284 0.000040923 0.000016240 0.000043222 -0.000002790 0.000033325 -0.000012907 -0.000006244 0.000000451 0.000011836 -0.000000754 0.000019751 0.000005025 -0.000002933 0.000023494 -0.000031679 0.000014832 0.000027803 -0.000032742 0.000003730 -0.000018784 0.000017944 0.000012215 -0.000034540 -0.000006871 0.000012941 0.000023385 -0.000004248 -0.000052780 -0.000004952 0.000003139 0.000028482 0.000002556 -0.000018118 -0.000001235 -0.000013209 0.000006992 0.000000382 -0.000131594 0.000001164 -0.000031110 0.000069444 0.000007539 0.000151981 0.000006450 0.000029311 -0.000114884 -0.000014395 -0.000028518 -0.000001539 0.000025934 0.000014949 0.000001578 -0.000069134 0.000011133 -0.000033230 0.000043975 0.000019385 -0.000037828 -0.000024411 0.000044780 0.000018841 0.000000269 -0.000017870 -0.000003570 0.000021650 0.000019687 0.000007456 0.000032167 0.000008806 0.000002046 -0.000014181 0.000005386 0.000027710 -0.000007295 0.000015950 -0.000024747 -0.000006614 -0.000043435 0.000013252 -0.000052557 0.000033628 0.000011926 0.000014991 0.000000474 0.000012649 -0.000003175 0.000000327 -0.000044280 -0.000011978 0.000011824 0.000024540 -0.000007373 -0.000004417 0.000005821 -0.000022530 0.000001694 0.000005095 0.000312488 0.000034995 0.000060821 -0.000025690 0.000093155 0.000579484 0.000152148 0.000036878 -0.000135459 0.000296501 -0.001418534 -0.000002381 0.000061372 0.000153161 -0.000190003 -0.000268928 0.000001197 0.000002183 0.000029412 -0.000050213 -0.000211026 -0.000005632 -0.000017620 0.000050318 -0.000057392 -0.000037724 -0.000031919 -0.000016424 -0.000002897 -0.000024435 0.000381105 -0.000061517 -0.000059670 -0.000039425 0.000014321 0.000129742 0.000003378 -0.000025510 -0.000024159 0.000003693 -0.000022577 0.000037622 0.000027745 0.000006808 0.000021826 -0.000545710 -0.000085477 -0.000054706 0.000102208 -0.000192336 -0.000067753 0.000007936 0.000019678 -0.000001034 0.000014925 -0.000041011 -0.000028017 -0.000033345 -0.000011765 -0.000054072 -0.001458809 -0.001332132 -0.000587881 0.000051811 0.000138401 0.001292313 -0.000348383 -0.000291135 0.000295239 0.000108602 0.002386802 -0.001010013 -0.000979492 -0.000134434 -0.000055679 -0.001232116 0.000188991 -0.000369048 -0.000068148 -0.000020282 0.000685909 -0.001460555 -0.001107067 -0.000191167 0.000104033 -0.001794997 0.000308229 0.000325664 -0.000074095 -0.000055966 0.000525619 -0.000981237 -0.000540397 0.000096308 -0.000889093 -0.003324897 -0.000112193 -0.000539454 0.000033233 -0.000131200 -0.001228799 -0.000207284 -0.000135663 -0.000002583 0.000034136 0.001193423 -0.000346565 -0.000226239 0.000027878 -0.000159213 0.000667068 -0.000555721 -0.000401782 0.000046981 0.000018348 -0.000327804 0.000237682 0.000157559 -0.000007966 -0.000068613 0.488006126 0.015030463 0.544899790 0.011964903 0.011224067 0.526406036 -0.006355863 -0.010860560 -0.006261296 0.485124054 0.001536829 0.003629671 -0.003717541 -0.057224884 0.464619252 -0.001297725 0.000051915 -0.000073616 -0.000441315 -0.000447339 -0.000625894 0.000460722 -0.000565512 -0.000257402 0.000304216 0.001316985 0.000323438 -0.000913759 0.000214712 0.000691101 -0.000018144 -0.000060635 0.000217865 0.000049763 -0.000051093 -0.000587953 -0.000207808 0.000474942 0.000098089 -0.000515264 -0.000761085 -0.000210923 0.000143439 -0.000247133 -0.000361606 0.000056479 0.000179486 0.000493284 0.001020890 -0.001352350 -0.000194716 -0.001199717 0.000665329 -0.002129650 0.003452815 0.000054763 0.002140338 -0.000353024 0.002584804 -0.002777936 -0.000206628 0.000371877 0.000198237 0.000235796 -0.000061088 0.000503172 0.000565251 0.000380205 0.000505544 -0.000573578 -0.001091996 -0.000268699 -0.001002044 -0.001749053 0.001506927 -0.000357630 0.000315680 -0.000025640 0.000183053 -0.000536074 -0.000556961 0.002915290 -0.000705794 -0.000055099 -0.000036030 0.001526313 -0.003776033 0.001259564 -0.000565134 0.000456118 0.002630314 -0.017515635 0.000728126 -0.001387827 0.000545302 -0.076412830 0.093182615 -0.000979819 0.001172086 -0.000746862 0.085461023 -0.289698450 -0.000194178 -0.000151774 0.000367586 -0.110141773 0.054022825 0.000898430 0.000421813 -0.000323103 -0.085096279 0.022701167 -0.001566408 -0.000467261 0.000145695 0.025118552 -0.054524905 -0.000137282 0.000016934 -0.000238894 -0.019610484 -0.013318994 -0.003379647 0.002748982 -0.000812893 -0.213691176 -0.140843063 0.002639526 -0.001447038 0.000717366 -0.135130218 -0.154408156 -0.001080775 0.000564872 0.000251812 -0.000169529 0.000009218 -0.045777905 -0.005364406 0.011932677 0.000579559 0.001201623 -0.005341719 -0.101727866 0.111099041 -0.000024586 0.001229236 0.012846705 0.124782072 -0.257270071 -0.000397523 -0.000341766 -0.237614770 -0.122094033 -0.000043728 0.001080794 0.000311001 -0.130608059 -0.124144409 0.002808396 0.001201322 0.000383185 -0.010568149 -0.003680873 -0.040796856 -0.000152699 -0.000143886 -0.201803615 0.133748592 -0.008244292 -0.001925615 -0.003022230 0.141678180 -0.160791969 0.011914191 -0.003006318 -0.003465495 0.000518419 0.003980313 -0.041036370 0.000001423 -0.000025440 0.000091967 0.000068458 0.000046375 -0.000088679 -0.000096218 0.000335575 -0.000017793 0.000012532 0.000037803 0.000074651 -0.000215177 -0.000075558 0.000014034 0.000012775 0.000038188 -0.000160330 -0.000090508 -0.000041709 0.000048314 0.000045294 -0.000162500 -0.000125299 0.000044180 0.000054480 0.000020519 -0.000041690 0.000017464 0.000002412 -0.000113824 -0.000141402 0.000375851 0.000193054 -0.000123916 0.000152462 0.000057853 -0.000325449 -0.000039315 0.000104289 0.000005811 -0.000012450 -0.000019971 -0.000129881 -0.000074153 -0.000316957 0.000283319 0.000081906 -0.000083414 0.000008583 -0.000647608 0.000045303 0.000073571 -0.000131644 0.000054241 0.000092573 -0.000486441 -0.000126610 0.000129676 -0.000113278 0.000154320 0.000269575 -0.000031147 0.000061161 0.000003080 0.000076562 0.000016920 -0.000019534 0.000060535 0.000000902 0.000730932 -0.000140852 -0.000054084 0.000062479 0.000021991 0.000982518 -0.000135858 -0.000052534 0.000046721 0.000015167 0.000369274 -0.000012853 -0.000064308 0.000074957 0.000019368 0.000342676 0.000021188 -0.000015598 0.000042718 0.000031138 0.001216816 -0.000631098 -0.000049041 0.000024274 -0.000049982 -0.000695505 -0.000201044 0.000002088 0.000005121 -0.000088520 0.000096363 -0.000031797 -0.000014242 -0.000040810 0.000065884 -0.000486177 -0.000724159 -0.000009542 0.000041501 0.000029903 -0.000485609 0.000187546 0.000019138 -0.000032564 0.000033793 -0.000028762 0.000117243 0.000025383 -0.000095547 -0.000086589 -0.000281708 -0.000315389 -0.000035742 0.000008372 -0.000051994 0.000120406 0.000270058 0.000084516 -0.000089806 -0.000028105 -0.000424146 -0.000452096 0.000003389 0.000017162 0.000083520 -0.000007274 -0.000074964 0.000010274 -0.000023134 -0.000033077 0.000008706 0.000059444 -0.000013998 0.000000583 0.000019619 0.000060964 -0.000089754 -0.000025847 0.000020287 -0.000042679 -0.000154613 -0.000010385 0.000013085 -0.000039605 -0.000010424 0.000223327 -0.000016759 -0.000059055 0.000054595 0.000006538 -0.000025908 0.000035631 0.000001679 -0.000014154 -0.000010245 0.000389529 -0.000323801 -0.000133055 -0.000038829 0.000062682 -0.001043993 -0.000154602 -0.000641237 -0.000024394 -0.000189013 -0.001735389 0.000483611 0.000108803 -0.000334823 -0.000292666 0.000156529 0.000068853 0.000079894 -0.000033992 0.000037601 -0.000020179 -0.000064837 -0.000012037 -0.000019396 -0.000055354 0.000136312 0.000114577 0.000066641 -0.000062063 0.000024891 0.000151145 0.000117810 0.000033956 -0.000018824 0.000035615 0.000065816 0.000007050 -0.000002882 0.000007179 0.000002016 0.000023289 -0.000019134 -0.000001890 -0.000008559 -0.000044792 0.000041558 -0.000040251 0.000040587 0.000052248 -0.000043591 -0.000100985 0.000114175 0.000027979 -0.000113631 0.000205639 -0.000033459 0.000025284 0.000003864 -0.000037859 0.000036135 -0.000035409 0.000051305 -0.000020267 -0.000041284 0.000059345 -0.000021099 0.000035091 -0.000039229 -0.000015160 0.000007967 0.000005716 -0.000010320 -0.000015062 0.000008511 -0.000030992 0.000065682 -0.000080562 0.000043286 0.000051897 -0.000056544 0.000046538 -0.000061168 0.000055138 0.000040569 -0.000031918 0.000001502 0.000005348 0.000011524 0.000003140 0.000008129 -0.000051049 0.000064078 -0.000017570 -0.000031484 0.000046975 0.000006930 0.000011621 -0.000012968 0.000025405 -0.000023889 0.000013863 -0.000023166 0.000001349 0.000014613 -0.000027970 0.000015054 -0.000017723 0.000007978 0.000005180 -0.000008004 0.000033105 -0.000030987 0.000019756 0.000030580 -0.000019726 0.000014391 -0.000020404 0.000008061 0.000000693 -0.000011673 -0.000020118 0.000030125 -0.000010880 -0.000034032 0.000055308 0.000044917 -0.000064922 -0.000004733 0.000056782 -0.000118183 -0.000048063 0.000083575 0.000003880 -0.000041770 0.000101851 -0.000005339 0.000022759 0.000006471 -0.000002809 0.000031548 -0.000033485 0.000026126 -0.000007706 -0.000030511 0.000024627 0.000003583 0.000015799 0.000014680 0.000011097 0.000024903 -0.000183870 0.000251177 -0.000179329 -0.000165805 0.000161744 -0.000233266 0.000306458 -0.000096205 -0.000159541 0.000237634 0.000013434 0.000052954 0.000072489 0.000053109 0.000093475 -0.000005381 0.000008135 -0.000006876 -0.000004709 0.000004423 -0.000006129 0.000003929 -0.000003292 -0.000005500 0.000001410 0.000022579 -0.000006954 0.000008086 0.000022486 -0.000000156 -0.000002192 0.000002500 0.000001441 -0.000002594 0.000006527 -0.000001339 -0.000002158 -0.000006907 0.000000517 -0.000012120 0.000004833 0.000018255 -0.000013675 0.000013302 0.000001913 -0.000623405 0.000273307 -0.000050752 -0.000008780 -0.000064342 0.000709070 -0.000055631 0.000301149 0.000041451 0.000126910 0.000582980 -0.000265520 -0.000000273 0.000194646 0.000191442 0.000220039 0.000112773 0.000210546 0.000065365 0.000035575 0.000660480 0.000357436 0.000291866 0.000101147 0.000132887 0.000356372 -0.000114052 -0.000022430 0.000114416 0.000093437 0.000034142 -0.000065012 0.000043660 0.000031866 -0.000050257 0.000143743 -0.000183219 0.000033956 0.000094520 -0.000156193 0.000006686 -0.000051449 -0.000034948 -0.000018044 -0.000075281 0.000090973 -0.000132601 0.000112311 0.000087416 -0.000080036 0.000095978 -0.000112786 0.000040810 0.000073688 -0.000086645 -0.000064743 0.000022747 -0.000081936 -0.000081618 -0.000028643 0.000019316 0.000069446 -0.000021801 0.000023057 0.000023729 0.000016879 -0.000001332 -0.000012331 0.000016503 -0.000006993 -0.000012620 -0.000001034 0.000006148 -0.000008473 0.000016963 0.000024887 -0.000139176 0.000019988 -0.000008872 -0.000060767 0.000063330 0.000009394 -0.000026847 0.000034719 -0.000041553 -0.000049315 0.000028613 0.000019156 -0.000029409 0.000038038 -0.000035365 -0.000020374 0.000032314 -0.000033661 -0.000002810 0.000008875 -0.000001117 -0.000001438 0.000005572 0.000006598 -0.000018249 -0.000002982 0.000016362 -0.000013092 -0.000006518 0.000002287 0.000038617 -0.000010511 0.000009603 0.000012846 0.000017426 0.000010004 -0.000011438 0.000016319 0.000001341 -0.000026399 0.000005541 0.000021629 -0.000022023 0.000011033 -0.000005269 0.000017410 0.000001864 -0.000001252 0.000010192 -0.000007091 -0.000003880 0.000002307 -0.000006454 -0.000005308 0.000000603 0.000007381 -0.000005733 0.000002509 0.000005932 0.000004312 0.000009677 -0.000006905 0.000005590 0.000009533 -0.000000807 0.000000140 -0.000002708 -0.000000844 0.000000307 -0.000006011 -0.000001243 0.000003039 -0.000005148 -0.000001767 0.000005513 0.000062499 -0.000018770 0.000013242 0.000027542 -0.000009629 0.000020350 0.000007726 -0.000004263 0.000012712 0.000035315 -0.000019603 -0.000018651 0.000026415 -0.000024792 0.000029063 -0.000013914 -0.000018667 0.000021618 -0.000013764 0.000017300 -0.000010804 -0.000007148 0.000013138 -0.000003140 -0.000009763 0.000008474 0.000003882 -0.000003456 0.000001108 0.000004102 -0.000011850 0.000001685 0.000000873 -0.000009838 0.000000882 -0.000008300 -0.000001577 -0.000002329 -0.000006108 -0.000020850 0.000019300 0.000007083 -0.000013685 0.000017728 0.000004516 0.000004466 -0.000004292 0.000004591 0.000000578 -0.000000074 0.000003233 -0.000004632 0.000000385 0.000001679 -0.000006183 -0.000005905 0.000006055 -0.000006735 -0.000004413 -0.000027764 0.000013754 0.000021850 -0.000013703 0.000011747 -0.000045184 -0.000072217 0.000041714 -0.000058879 -0.000023047 -0.000036692 0.000003132 0.000015953 -0.000020994 0.000010678 -0.000017289 -0.000013608 0.000007635 -0.000013469 -0.000000358 0.000014389 0.000003807 -0.000006938 0.000021157 -0.000017691 0.000000966 0.000000842 0.000008450 0.000003749 0.000004716 0.000008094 -0.000032132 -0.000010185 0.000005769 -0.000028301 0.000019592 0.000018427 -0.000015138 0.000023469 0.000001573 0.000040035 -0.000026793 -0.000010170 0.000029735 -0.000035328 -0.000005103 -0.000006604 -0.000000562 -0.000004764 -0.000010097 0.000008449 0.000006856 0.000009002 0.000006394 0.000002176 0.000024589 -0.000004536 -0.000001268 0.000019557 -0.000013558 0.000018092 0.000003244 0.000004889 0.000009304 -0.000002552 -0.000023324 -0.000008614 0.000014335 -0.000022946 -0.000001685 -0.000021473 0.000002817 0.000003848 -0.000014079 0.000008717 0.000012990 0.000011584 -0.000002576 0.000016167 0.000010355 0.000003520 0.000016831 -0.000000482 0.000006257 0.000014352 -0.000010983 0.000002868 -0.000000851 -0.000009208 0.000004880 -0.000016094 0.000033460 -0.000000032 -0.000011771 0.000035888 0.000012140 -0.000037726 -0.000005260 0.000004397 -0.000038197 0.000008995 0.000012312 0.000000396 0.000011526 0.000008844 -0.000017040 0.000011287 0.000008965 -0.000014289 0.000019974 0.000017855 0.000024092 -0.000001878 0.000023532 0.000007150 0.000008355 0.000003735 0.000004736 0.000011725 0.000006157 0.000003299 -0.000009280 0.000003974 0.000000834 -0.000008721 0.000003865 -0.000004595 -0.000003242 0.000002669 -0.000008509 -0.000018345 0.000006198 0.000004376 -0.000018170 0.000011804 0.000006832 -0.000002870 0.000001235 0.000005669 -0.000004849 0.000005421 0.000013719 -0.000004578 0.000009440 0.000012787 -0.000013187 -0.000000939 0.000001587 -0.000015019 0.000000137 0.000063067 -0.000047397 0.000090689 0.000100600 -0.000024853 0.000133660 -0.000133858 0.000231699 0.000097184 -0.000004584 -0.000093822 0.000178514 -0.000450247 -0.000253173 0.000132744 -0.000027713 0.000030518 -0.000087005 -0.000065616 0.000026102 -0.000038021 0.000041015 -0.000044345 -0.000046413 0.000024131 0.000008048 0.000000589 -0.000048147 -0.000023297 0.000006618 0.000027775 -0.000049531 0.000045814 0.000025922 -0.000045622 -0.000011638 -0.000015504 0.000030003 0.000002856 -0.000024647 0.000002138 0.000005457 0.000031157 0.000017883 0.000011332 -0.000120056 0.000110435 -0.000161713 -0.000125007 0.000045661 0.000009183 0.000010901 -0.000006958 0.000004446 0.000009815 -0.000043535 0.000009399 -0.000028828 -0.000033223 -0.000009473 0.000067666 0.000226280 -0.000391900 -0.000055988 -0.000013645 0.000076678 -0.000071044 0.000091658 -0.000030045 -0.000028846 0.000201011 -0.000190558 0.000232365 0.000181022 -0.000219197 -0.000138182 0.000199994 0.000058506 -0.000147496 0.000241684 0.000108607 -0.000123606 0.000092543 0.000103592 -0.000067045 -0.000191659 0.000272154 -0.000003148 -0.000119816 0.000250687 -0.000106488 -0.000079778 -0.000098553 0.000044394 -0.000061979 -0.000117478 0.000452642 -0.000096791 -0.000108697 0.000222021 0.000031522 -0.000303809 -0.000012436 0.000138538 -0.000041701 0.000035148 -0.000096259 0.000031810 0.000000279 -0.000092647 0.000062081 -0.000078884 -0.000014676 0.000049820 -0.000102703 -0.000040528 0.000052484 -0.000010669 -0.000047254 0.000050085 0.374511396 0.062075662 0.172434996 -0.131553103 0.145574207 0.517305922 -0.092313558 -0.028242492 -0.039467047 0.634672924 -0.018166601 -0.100350158 -0.066339237 -0.003607679 0.582774897 -0.017931767 -0.060638715 -0.185830443 -0.031860330 -0.053078192 0.000090937 -0.000019821 -0.000116104 0.000002212 0.000023182 0.000107438 -0.000191184 -0.000465393 0.000025942 0.000175364 -0.000125819 -0.000004642 0.000189237 -0.000001768 -0.000068992 0.000104826 0.000023923 0.000053423 -0.000007164 -0.000014617 -0.000276257 -0.000007955 0.000125284 0.000003155 -0.000059985 0.000705526 -0.000002971 -0.000085860 -0.000004017 0.000125043 0.000111094 -0.000006615 -0.000001072 -0.000000176 0.000022898 0.000009359 -0.000015968 -0.000050521 0.000015456 -0.000001146 0.000038557 -0.000102931 -0.000253816 0.000003075 0.000145405 -0.000019735 0.000082930 0.000167803 -0.000063888 0.000029108 0.000052838 -0.000081261 -0.000165348 0.000033388 0.000049575 -0.000106181 -0.000052408 0.000097067 -0.000021404 0.000017316 -0.000330818 -0.000229822 0.000167847 0.000001267 -0.000075006 0.000486980 0.000455860 -0.000185137 -0.000004900 0.000049595 -0.000300790 -0.000167500 0.000134749 -0.000011037 -0.000010596 0.000447582 0.000002378 -0.000512757 0.000013900 0.000178029 -0.000087937 -0.000002828 0.000045622 -0.000007375 -0.000067149 -0.000001575 -0.000023931 -0.000110970 0.000015980 0.000013606 -0.000176550 0.000267908 0.000668480 -0.000082036 -0.000311783 0.000050793 0.000001160 0.000028084 -0.000159225 0.000106524 -0.000129369 0.000164748 0.000424962 -0.000053699 -0.000085879 0.000122627 -0.000151570 -0.000281439 -0.000007568 0.000277220 -0.000119595 -0.000059942 -0.000054552 0.000120099 -0.000084468 -0.000208432 -0.000003245 0.000222456 0.000078056 -0.000070011 0.000002711 0.000069083 0.000084431 -0.000046981 -0.000124064 -0.000347713 0.000365082 0.000699912 0.000078400 -0.000689555 0.000033038 -0.000100659 -0.000114505 -0.000084978 0.000137909 0.001138593 -0.003438989 -0.005971916 -0.223271546 0.094633312 -0.015816325 0.007805651 -0.015690485 0.098392175 -0.106086295 -0.022417842 0.005448705 -0.030129084 -0.088597092 0.050037919 0.008859083 0.001037050 -0.006855603 -0.257702870 -0.039583882 0.015699570 0.000509693 -0.016529471 -0.044876151 -0.061318308 0.028329163 -0.001118483 -0.031587992 0.114339774 0.025809968 -0.000131498 -0.006287631 -0.003188307 -0.059265525 -0.039306589 -0.001044081 -0.012052550 -0.013081888 -0.037791747 -0.310387139 -0.003792094 -0.040774213 -0.010225465 0.007109731 0.048099438 0.000058245 0.000015401 -0.000032141 -0.000005035 0.000004157 0.000067989 -0.000007624 -0.000050709 -0.000011785 0.000025104 -0.000017748 -0.000044226 -0.000081404 0.000021216 0.000012083 -0.000052942 0.000026414 0.000061054 0.000009604 -0.000027959 -0.000017425 0.000027375 0.000011550 0.000013242 -0.000032740 -0.000002587 -0.000042661 -0.000030915 -0.000002859 0.000017458 -0.000008657 -0.000029276 -0.000027684 0.000004782 0.000009887 0.000038614 -0.000039144 -0.000111098 0.000013492 0.000011515 -0.000036663 0.000042226 0.000049774 0.000012466 -0.000039721 0.000007215 -0.000012634 -0.000044330 0.000008176 0.000002198 0.000066509 -0.000000490 -0.000117794 0.000018034 0.000002980 -0.000028749 -0.000048966 0.000057747 -0.000030732 0.000042025 -0.000040838 -0.000005184 0.000036011 0.000002170 -0.000005846 -0.000058573 0.000027843 0.000139154 -0.000020375 -0.000009474 0.000030395 -0.000001386 -0.000026308 -0.000003477 0.000017911 0.000001649 -0.000029151 -0.000055945 0.000010501 0.000016220 0.000030000 0.000025851 0.000001803 -0.000004815 -0.000000850 -0.000080079 0.000015171 0.000145893 -0.000017618 -0.000011951 0.000086399 -0.000031471 -0.000124845 -0.000000061 0.000025478 0.000007533 -0.000010452 -0.000019665 0.000001178 0.000006083 0.000039478 -0.000023629 -0.000076856 0.000003464 0.000014463 0.000060264 -0.000031147 -0.000081863 -0.000006439 0.000028793 -0.000033858 -0.000005834 0.000020627 0.000005061 -0.000004352 0.000089912 -0.000026720 -0.000138265 0.000006626 0.000018972 -0.000286281 -0.000167958 0.000430429 -0.000123603 0.000132578 0.000039467 -0.000523698 -0.000612594 0.000039184 0.000341208 0.000603571 -0.000086527 -0.001036194 0.000132836 0.000092267 0.000003223 0.000016821 0.000041907 -0.000012899 -0.000006993 -0.000008874 -0.000017600 -0.000000645 -0.000003303 0.000016219 0.000025396 0.000016860 -0.000003587 -0.000003268 -0.000007693 0.000009984 0.000024489 0.000026154 -0.000004607 -0.000016321 -0.000008184 0.000006701 0.000009540 0.000002900 -0.000007544 0.000008483 -0.000003638 -0.000013588 -0.000000161 0.000004849 -0.000013881 0.000063829 0.000152096 -0.000009293 -0.000041652 -0.000039844 -0.000022429 0.000006021 0.000006405 0.000011051 0.000043966 -0.000057340 -0.000118509 0.000005847 0.000027938 -0.000042649 -0.000021091 -0.000036793 0.000007251 0.000010322 0.000020242 -0.000042826 -0.000119938 0.000005230 0.000028500 0.000067370 -0.000036157 -0.000084141 -0.000000689 0.000016936 -0.000033069 0.000060936 0.000138905 -0.000002129 -0.000054775 -0.000006644 0.000089352 0.000189035 -0.000016189 -0.000044336 -0.000032239 0.000022954 0.000064113 -0.000001230 -0.000011065 0.000010071 -0.000033758 -0.000066437 0.000001778 0.000029235 -0.000001978 0.000008701 0.000014029 -0.000001143 -0.000003470 0.000030758 0.000006971 -0.000008867 -0.000003595 -0.000001731 0.000037239 0.000003905 -0.000012919 -0.000004504 0.000000389 -0.000054166 0.000046399 0.000115638 0.000000237 -0.000040493 0.000010607 0.000003438 -0.000002890 -0.000000672 -0.000005124 -0.000028106 -0.000009364 -0.000017975 0.000004294 0.000003189 0.000032254 0.000001961 -0.000027487 -0.000001770 -0.000000225 -0.000055304 0.000006887 0.000050497 0.000003536 -0.000006847 -0.000077108 0.000044561 0.000111548 -0.000004727 -0.000013284 0.000046105 -0.000056590 -0.000117142 0.000004484 0.000032073 -0.000047407 0.000038805 0.000124397 -0.000001552 -0.000025381 -0.000203771 -0.000260246 -0.000477796 0.000045801 0.000170762 0.000338613 -0.000188279 -0.000431256 -0.000009495 0.000166529 0.000005605 0.000194987 0.000478427 -0.000025195 -0.000097171 0.000013298 -0.000011744 -0.000029831 0.000000215 0.000009272 0.000025488 -0.000011943 -0.000034019 -0.000001219 0.000008626 -0.000100878 0.000043945 0.000137099 0.000003479 -0.000034517 -0.000000132 0.000001492 0.000005516 -0.000000042 -0.000000807 0.000022996 -0.000012337 -0.000037018 -0.000000268 0.000008794 -0.000026441 0.000002877 0.000019446 0.000003191 -0.000005635 0.000224184 -0.000012809 -0.000491456 0.000113889 -0.000009891 -0.000079974 0.000227981 0.000401119 -0.000049513 -0.000144198 -0.000348424 0.000125167 0.000648933 -0.000063694 -0.000103378 0.000089363 0.000231714 -0.000004940 0.000056109 -0.000171151 -0.000061565 0.000288887 0.000379687 -0.000021211 -0.000198455 -0.000214168 0.000056022 0.000352645 -0.000025138 -0.000056887 0.000166262 0.000036327 0.000013067 -0.000018043 -0.000020306 -0.000299051 0.000091476 0.000239403 0.000015025 -0.000093434 0.000032273 -0.000096920 -0.000257883 0.000006211 0.000053382 0.000188372 0.000135906 0.000233253 -0.000027300 -0.000094021 -0.000115935 0.000100728 0.000222731 0.000001336 -0.000081022 0.000087569 -0.000220976 -0.000534506 0.000019839 0.000125258 -0.000035710 0.000002294 0.000032596 0.000003555 -0.000007071 -0.000003409 -0.000002356 -0.000006365 0.000002551 -0.000000634 -0.000009031 0.000004263 0.000015429 -0.000000065 -0.000002093 0.000066873 -0.000006730 -0.000067926 -0.000004433 0.000010925 0.000016494 -0.000010669 -0.000039326 0.000002720 0.000003430 -0.000015709 0.000007040 0.000033087 -0.000001345 -0.000001947 0.000033960 0.000000747 -0.000019082 -0.000006198 0.000006203 -0.000007962 0.000004788 0.000013591 0.000000235 -0.000004570 0.000019899 0.000000710 -0.000012145 -0.000003747 0.000002815 -0.000015490 0.000000464 0.000013243 0.000001172 -0.000003046 -0.000012779 0.000002323 0.000010439 0.000001879 -0.000004541 0.000010292 0.000003911 0.000004254 -0.000003961 0.000001323 -0.000004776 0.000002198 0.000009766 -0.000000763 -0.000001677 0.000008147 -0.000003953 -0.000011827 -0.000000434 0.000003888 -0.000009791 -0.000000385 0.000007351 0.000001506 -0.000000837 -0.000015651 0.000002158 0.000015537 0.000001923 -0.000003385 -0.000001166 -0.000002376 -0.000002373 0.000000707 0.000001470 0.000004866 -0.000001440 -0.000005521 -0.000000543 0.000001908 -0.000038786 0.000002092 0.000033882 0.000004120 -0.000006175 -0.000007390 0.000007421 0.000020356 -0.000001679 -0.000004615 -0.000001567 -0.000002783 -0.000011350 0.000002968 -0.000001448 -0.000005894 -0.000003642 -0.000006667 0.000003561 -0.000000857 -0.000007218 0.000002638 0.000006833 0.000001364 -0.000003706 -0.000000757 0.000002271 0.000004489 -0.000000954 -0.000001101 0.000009781 -0.000001629 -0.000011598 -0.000000731 0.000001831 0.000008991 -0.000005606 -0.000016179 0.000000288 0.000004328 -0.000005664 0.000001022 0.000010668 -0.000000701 0.000000518 -0.000004301 0.000000122 0.000002243 0.000000694 -0.000001100 -0.000003469 -0.000002428 -0.000001425 0.000001100 0.000001094 0.000011182 -0.000002341 -0.000011059 -0.000001311 0.000003323 -0.000009567 0.000016800 0.000044285 -0.000004191 -0.000007503 0.000061009 -0.000011674 -0.000053794 -0.000006740 0.000019871 0.000003968 0.000003307 0.000009413 -0.000003122 0.000001211 0.000028363 -0.000011531 -0.000033346 -0.000002173 0.000010690 -0.000017042 0.000013820 0.000033996 -0.000000627 -0.000009654 -0.000002398 0.000011071 0.000025578 -0.000002703 -0.000006980 0.000017816 -0.000014053 -0.000038726 0.000002314 0.000009684 -0.000032015 0.000009759 0.000035772 0.000003323 -0.000010560 0.000019241 0.000000512 -0.000018449 -0.000000798 -0.000001028 -0.000003222 -0.000001451 -0.000001694 0.000001132 0.000001254 -0.000016484 0.000019737 0.000045526 -0.000002351 -0.000013095 0.000000840 0.000010382 0.000012386 -0.000002064 -0.000008311 0.000004028 0.000009840 0.000013720 -0.000002826 -0.000006133 0.000014486 -0.000003504 -0.000012693 -0.000002105 0.000005872 -0.000004343 -0.000003481 0.000000942 0.000000980 0.000003341 -0.000012398 0.000009512 0.000024012 -0.000000368 -0.000008904 -0.000011195 0.000006131 0.000020494 -0.000000192 -0.000005325 -0.000006601 -0.000003759 0.000000591 0.000001928 0.000002760 -0.000040447 0.000009689 0.000046438 0.000002733 -0.000007998 0.000029262 -0.000012942 -0.000044499 0.000000776 0.000010880 -0.000029514 0.000018723 0.000048273 -0.000000389 -0.000015243 -0.000010416 0.000004185 0.000021766 -0.000000158 -0.000001384 -0.000018223 0.000017091 0.000042423 -0.000001947 -0.000013520 -0.000011503 0.000014454 0.000031465 -0.000002118 -0.000011413 0.000013787 -0.000000324 -0.000011074 -0.000002065 0.000001419 0.000006052 -0.000003537 -0.000011931 0.000000015 0.000002404 0.000011692 -0.000010577 -0.000018906 0.000000421 0.000009916 -0.000000953 0.000005130 0.000006077 -0.000001072 -0.000004110 -0.000024470 0.000008602 0.000030067 0.000001702 -0.000008697 0.000004649 -0.000007368 -0.000013076 0.000000954 0.000007055 -0.001234951 -0.000203276 0.003544782 -0.000099672 -0.000101334 -0.005558331 -0.003135801 0.002424550 -0.000196284 -0.001143983 -0.001045896 -0.000807365 -0.000946384 -0.000273076 -0.000132782 0.000398098 0.000133604 0.000552233 0.000070270 -0.000041387 0.000017044 0.000373448 0.000680209 0.000052043 0.000055440 -0.001113059 -0.000525389 -0.000356141 -0.000065829 0.000009403 0.000961599 0.000458969 -0.000304605 0.000268596 0.000007119 0.001122209 -0.001017580 -0.001547644 0.000041403 0.000036653 -0.001740915 -0.002368831 -0.001907742 -0.000301338 0.000058528 0.001664342 0.000283292 -0.001857848 0.000011246 0.000309242 0.000099024 0.000232621 0.000926544 0.000125218 -0.000155816 0.001206554 -0.000235787 0.000183568 0.000045383 -0.000040867 0.003875605 -0.003489966 -0.004707029 0.000742392 -0.000278798 -0.004747291 -0.000298646 -0.003578906 0.000569406 0.000291633 -0.001319376 -0.002044839 -0.001339455 0.000807249 -0.000218988 -0.001132385 0.000340581 0.000447751 -0.000000557 -0.000033509 -0.000564060 -0.000000786 0.001223062 0.000043758 -0.000216123 0.001598849 -0.000737328 -0.001007022 0.000060248 0.000134375 -0.000029832 0.000045786 0.000323819 0.000020160 -0.000067163 0.000583573 -0.000240037 -0.000657782 -0.000018084 0.000180795 -0.000658976 0.000448700 0.000352839 -0.000136399 0.000056742 0.000317119 0.000613174 0.001274107 -0.000172241 -0.000018869 0.000040356 0.000415138 0.000719037 -0.000091533 -0.000027801 -0.000390205 -0.000729062 -0.001185181 0.000288871 0.000014228 0.511503785 0.000037327 0.060665378 0.000156992 -0.035302930 0.160911467 -0.000116969 -0.046268904 0.141794351 0.216325520 -0.000038907 0.005272747 0.005789244 -0.000525051 0.184629992 -0.000117519 -0.013232412 -0.011366778 0.003407374 0.147739152 0.000260666 -0.018832737 -0.015983535 0.002271471 0.000277415 0.000026239 -0.003274015 -0.000180431 -0.001812686 -0.016084977 0.000106038 0.014525866 -0.006126474 0.007472241 -0.020787709 0.000011856 0.021963809 -0.006702568 0.007673908 0.001164124 -0.000116021 -0.000035681 -0.000271670 0.000520135 0.000015642 0.000125924 -0.000010024 0.000099110 -0.000424454 -0.000146129 -0.000049465 0.000096253 -0.000154130 0.000124472 -0.000010294 -0.000161228 -0.000121225 -0.000023017 -0.000111459 -0.000076681 0.000177469 0.000012705 0.000084169 0.000087150 0.000201743 -0.000117577 -0.000240623 0.000058024 -0.000074657 -0.000136776 0.000272223 0.000094080 0.000267172 -0.000424737 0.000062768 -0.000066015 0.000170042 -0.000440261 0.000319457 -0.000035631 0.000018842 -0.000147232 0.000214360 -0.000075473 -0.000035731 -0.000452224 0.000209837 0.000145682 -0.000058865 0.000049870 -0.000094435 -0.000269204 0.000777087 -0.000859986 0.000070907 -0.000313990 -0.000410769 0.001055985 -0.000848033 -0.000018130 0.000149577 0.000083403 0.000115250 -0.000118373 0.000203531 -0.000020850 0.000139470 0.000027642 -0.000007016 0.000036355 -0.000260593 0.000403640 -0.000008504 0.000090408 0.000095604 -0.000026660 0.000019269 -0.000090092 0.000122967 -0.000095405 -0.000334817 -0.000084457 -0.000273885 0.000157266 -0.000070955 0.000097442 -0.000012034 -0.000428208 0.000307546 0.000096074 -0.096480798 -0.000005007 0.000010611 -0.000006794 -0.000001842 0.056466857 -0.000024705 0.000031756 -0.000022273 -0.000008876 -0.100287956 0.000000049 -0.000044573 0.000015887 0.000006832 0.126833133 0.000010537 -0.000014567 -0.000000270 0.000000762 0.031448736 0.000001636 -0.000024594 0.000007116 -0.000000711 -0.117519633 -0.000003819 -0.000021061 0.000009267 0.000004056 0.005725890 -0.000020618 0.000054427 -0.000029326 -0.000008705 0.039553582 0.000001533 -0.000055776 0.000020888 0.000002561 -0.056766459 -0.000017287 -0.000025078 -0.000002081 -0.000010330 0.000017673 -0.000003103 0.000026699 -0.000021905 -0.000001173 0.000020346 0.000051188 0.000001932 -0.000027994 0.000013607 0.000036076 -0.000080915 0.000033665 0.000030559 -0.000014064 -0.000024805 0.000006501 -0.000027599 0.000013427 0.000001443 -0.000002284 -0.000053209 0.000024280 0.000025989 -0.000003522 0.000000868 0.000004404 0.000029381 0.000015320 0.000002965 0.000005932 0.000016443 -0.000011819 0.000014199 0.000002176 0.000042965 0.000015751 -0.000020897 0.000014451 -0.000002170 -0.000017164 -0.000028031 -0.000012458 0.000028103 -0.000003859 0.000022465 -0.000046290 0.000021703 0.000026566 -0.000010687 0.000058283 -0.000045899 0.000036623 -0.000006207 -0.000010641 -0.000040820 0.000069423 -0.000020386 -0.000015991 0.000012653 -0.000022062 0.000002763 -0.000002939 0.000010454 0.000005327 -0.000060388 0.000044218 -0.000030994 -0.000024763 0.000006181 0.000022452 0.000004831 0.000000564 -0.000023966 -0.000007057 0.000022304 -0.000021472 0.000019382 0.000010644 0.000000473 0.000006483 -0.000025842 0.000011497 -0.000010744 -0.000001955 -0.000072427 0.000035331 -0.000023079 -0.000004230 0.000009139 0.000055044 -0.000055525 0.000075357 0.000001985 -0.000005325 0.000006004 0.000030590 -0.000021098 -0.000001523 0.000003601 0.000034277 -0.000065825 0.000074981 0.000015958 -0.000004632 0.000035459 0.000005624 0.000004325 -0.000008413 -0.000001191 -0.000011687 0.000004149 -0.000008722 0.000009676 0.000000551 0.000058947 -0.000010512 0.000020046 0.000001733 -0.000001528 -0.000215937 0.000154302 -0.000074454 -0.000032890 0.000017798 0.000327125 0.000062102 0.000060737 -0.000016653 -0.000012297 0.000561184 -0.000175040 0.000168028 -0.000051499 -0.000039949 -0.000020707 0.000009089 -0.000012890 -0.000000433 0.000001949 -0.000000742 -0.000004010 0.000008667 -0.000004531 -0.000002030 0.000005876 0.000006909 -0.000008617 -0.000003032 0.000000845 -0.000008991 0.000012573 -0.000016624 -0.000002553 -0.000004058 -0.000004258 0.000000185 -0.000006359 0.000003394 -0.000002025 0.000009128 -0.000007554 0.000000136 -0.000002413 -0.000007798 -0.000075428 -0.000193805 -0.000178707 -0.000039934 0.000029530 -0.000023882 -0.000318715 0.000509601 -0.000028752 0.000003098 0.000040253 -0.000165264 0.000324543 -0.000533909 -0.000020337 0.000026518 0.000023498 0.000085618 -0.000155364 -0.000017593 0.000053288 0.000132752 -0.000163989 -0.000220149 0.000004549 0.000031901 0.000146326 0.000014269 0.000148882 0.000013320 -0.000071187 -0.000014131 -0.000027954 0.000000816 0.000007486 -0.000077469 -0.000183839 -0.000080947 0.000138346 0.000015549 -0.000024598 -0.000101278 -0.000002622 0.000034905 0.000005184 0.000021406 -0.000071395 -0.000014266 0.000018876 0.000005873 -0.000002988 0.000055344 -0.000066001 0.000081456 0.000004881 0.000004262 0.000058955 -0.000026399 0.000056866 -0.000001486 0.000003353 -0.000064578 0.000058459 0.000016098 0.000001024 -0.000045446 0.000102678 -0.000029138 -0.000045331 -0.000005921 0.000002865 0.000025910 0.000037829 -0.000008094 -0.000001158 0.000010693 0.000070751 0.000073744 -0.000205408 -0.000029664 0.000017979 0.000211300 -0.000024067 0.000296507 -0.000059671 -0.000026906 -0.000111421 0.000097954 -0.000120695 0.000003581 -0.000031817 -0.000087056 -0.000020391 -0.000005441 0.000009193 0.000037992 -0.000028939 0.000053144 -0.000009753 0.000004111 -0.000053248 -0.000041315 -0.000023725 0.000013237 0.000011026 0.000268542 0.000177936 0.000012027 -0.000344361 -0.000018868 0.000160873 0.000002052 -0.000018380 -0.000234589 0.000006259 -0.000232829 -0.000126082 -0.000057059 0.000058031 0.000025282 0.000013355 -0.000003812 -0.000004056 -0.000004272 0.000000996 0.000012677 -0.000002250 -0.000002196 -0.000006793 -0.000000548 -0.000053241 0.000006290 -0.000013335 0.000012136 0.000002008 -0.000003463 -0.000018127 0.000004364 -0.000012938 0.000000288 0.000015414 0.000033184 -0.000008791 0.000028300 0.000000903 -0.000008150 0.000051519 -0.000046986 0.000008675 0.000004051 0.000260401 -0.000089363 0.000071642 0.000008190 -0.000014353 -0.000218059 0.000015371 -0.000060740 0.000008028 0.000012383 -0.000347694 0.000094617 -0.000100298 0.000017104 0.000024362 -0.000011178 -0.000075032 0.000007021 0.000027042 -0.000001042 -0.000203217 -0.000039926 -0.000041770 0.000031161 0.000005636 -0.000181477 0.000046815 -0.000053103 0.000017499 0.000012634 -0.000028442 -0.000043130 -0.000002470 0.000098242 0.000003921 -0.000066275 0.000055093 -0.000008462 0.000132595 -0.000005583 0.000139965 0.000064238 0.000012091 0.000010847 -0.000012112 -0.000162966 -0.000109377 0.000006850 0.000179603 0.000011205 -0.000089439 0.000016436 -0.000017986 0.000101205 -0.000000448 0.000240532 0.000115444 0.000047133 -0.000104576 -0.000018838 -0.000016216 0.000043287 -0.000026799 0.000007073 0.000011933 0.000004232 0.000002644 -0.000006848 0.000008626 -0.000001188 -0.000007938 0.000005798 0.000002689 -0.000009550 0.000001767 0.000034737 -0.000087486 0.000050524 -0.000004438 -0.000028036 0.000019593 -0.000015758 -0.000012442 0.000028267 -0.000000076 -0.000017697 0.000003590 0.000030679 -0.000023553 -0.000001374 0.000008926 -0.000025698 0.000026734 -0.000013938 -0.000009653 -0.000007198 0.000002264 -0.000002066 -0.000002109 0.000000432 0.000006775 -0.000011371 0.000008358 -0.000003465 -0.000004390 -0.000007389 0.000026867 -0.000017601 0.000004278 0.000008053 -0.000004688 0.000009916 -0.000011204 0.000005422 0.000003485 -0.000002049 -0.000007272 0.000012287 -0.000010883 -0.000003104 -0.000005433 0.000007699 -0.000002746 -0.000002123 0.000001390 0.000005662 -0.000003428 0.000003695 0.000000028 -0.000000948 -0.000004109 0.000006398 -0.000002161 -0.000000581 0.000001573 -0.000008186 0.000008832 -0.000003724 -0.000001268 0.000002144 0.000000711 0.000001312 0.000000601 0.000000213 0.000000264 0.000002634 -0.000002314 0.000003003 -0.000000949 -0.000000891 -0.000017430 0.000043704 -0.000025073 0.000003582 0.000013995 -0.000009777 0.000008089 -0.000002678 -0.000007860 0.000000556 0.000007620 0.000000590 -0.000018592 0.000015133 0.000001841 0.000003929 0.000000091 -0.000008181 0.000009817 0.000001095 -0.000002244 0.000002193 -0.000007732 0.000002549 0.000002142 -0.000002263 0.000003008 -0.000002116 -0.000000169 0.000000251 0.000006331 -0.000007782 0.000000564 0.000004795 0.000000289 0.000007264 -0.000006236 0.000005582 0.000003212 -0.000001441 -0.000006470 0.000005248 0.000008956 -0.000008758 -0.000001451 -0.000001150 0.000005677 -0.000004635 0.000001548 0.000001830 0.000000026 0.000004264 -0.000000974 0.000000831 0.000000931 0.000005769 -0.000007079 0.000005092 -0.000000361 -0.000002055 -0.000019132 0.000003936 -0.000019071 -0.000023146 0.000021978 0.000022716 -0.000116217 0.000046126 -0.000029397 -0.000048062 -0.000005572 -0.000005280 -0.000017406 -0.000011385 -0.000021377 0.000012153 -0.000011478 -0.000002352 0.000007145 0.000024619 -0.000011707 0.000054010 -0.000117386 -0.000010063 -0.000003585 -0.000012132 0.000012271 -0.000015825 -0.000004014 0.000028372 0.000018281 -0.000023945 -0.000002252 0.000022910 -0.000005089 -0.000013864 0.000020335 -0.000051412 0.000006846 -0.000003168 0.000011822 -0.000012589 -0.000020058 0.000013730 -0.000027199 0.000002050 -0.000009625 -0.000001669 0.000000794 0.000015657 -0.000018239 0.000020525 0.000000126 -0.000041703 -0.000006301 -0.000003246 0.000000111 -0.000009152 -0.000005080 0.000005940 -0.000005236 0.000002860 -0.000002393 -0.000011091 -0.000013976 0.000004928 -0.000015814 0.000018074 -0.000006879 -0.000006005 -0.000001333 -0.000004138 0.000012010 -0.000004650 0.000002525 -0.000010855 0.000009386 -0.000003599 -0.000005591 0.000003247 -0.000009792 0.000011519 -0.000001605 -0.000006251 0.000002306 -0.000000926 -0.000001746 0.000005250 0.000000066 -0.000001227 -0.000021785 0.000017737 0.000007685 -0.000023058 -0.000011320 0.000022515 -0.000047478 -0.000016040 0.000029880 0.000010813 -0.000019551 0.000012165 -0.000019157 -0.000019738 0.000012314 -0.000011772 0.000003938 0.000010077 -0.000020465 -0.000011074 -0.000017164 0.000047325 -0.000025907 -0.000021614 0.000013297 -0.000013458 0.000016957 -0.000003985 -0.000022169 0.000014745 0.000005445 -0.000008414 -0.000000069 0.000002531 -0.000002810 0.000005954 0.000009615 -0.000008248 0.000004063 0.000006317 0.000005727 -0.000016845 0.000020821 0.000007001 -0.000024157 -0.000001561 0.000002024 -0.000003310 -0.000004016 0.000004162 -0.000013096 0.000012911 -0.000002434 -0.000009098 0.000009276 0.000005399 -0.000005113 0.000007029 0.000001807 -0.000008686 -0.000313890 0.000015846 0.000023880 -0.000007576 -0.000002324 0.000053559 0.000043452 0.000111909 -0.000024832 0.000003209 0.000264734 -0.000121310 -0.000204967 0.000076266 0.000008573 -0.000191259 -0.000012652 -0.000019125 0.000010144 0.000005693 -0.000021723 -0.000018293 -0.000018366 -0.000000728 -0.000001010 0.000414249 0.000007461 0.000002377 0.000001802 0.000001047 -0.000469295 0.000044803 0.000061096 -0.000035637 -0.000003462 -0.000522027 0.000007368 0.000021629 -0.000006618 -0.000004585 -0.000102712 -0.000010393 0.000003605 0.000006987 0.000002907 0.000223974 -0.000034396 -0.000030619 0.000010443 0.000019515 -0.000150633 -0.000012198 -0.000013250 0.000016521 0.000006271 -0.000190155 0.000008647 0.000014213 0.000000077 0.000002965 0.001215719 -0.000021841 -0.000739182 -0.000112023 -0.000116196 -0.001432686 -0.000491770 -0.000220890 -0.000548851 0.000245146 0.000056826 0.000415402 -0.000268528 -0.000568477 -0.000224354 -0.000277671 -0.001576294 -0.000827683 -0.000005403 -0.000002492 -0.000260034 -0.000558841 -0.000510067 -0.000423495 -0.000184208 0.000501625 -0.000435867 -0.000127400 0.000369983 0.000128555 -0.000037502 0.000233356 -0.001035850 -0.000385185 0.000127478 0.000182808 -0.000687145 -0.002092183 0.000423187 0.000037575 -0.000298312 -0.000093122 0.000350694 0.000044850 0.000067422 0.000103753 0.000095330 0.000059563 -0.000314917 0.000066900 -0.000000563 0.000242258 -0.000122390 -0.000287564 -0.000088068 -0.000010872 -0.000097714 0.000055025 0.000101261 0.000064140 0.192681593 0.001208026 0.038322730 0.011173574 -0.003625199 0.276488875 0.012052219 -0.004516119 -0.115401578 0.097576006 -0.000367944 -0.001328256 0.039521175 -0.017677295 0.044587173 0.000254079 -0.000125518 0.000104355 0.000691310 -0.000871866 0.000075334 -0.000178628 -0.000038906 -0.000578593 0.001074391 0.000045568 -0.000056385 0.000051785 0.000048363 0.000009728 0.000376191 -0.000390151 0.000074990 -0.000095764 0.000355029 -0.000342067 0.000418774 -0.000063117 0.000139344 -0.000392915 0.000225523 -0.000118309 0.000058142 -0.000082629 0.000059435 -0.000228477 0.000274174 -0.000025831 -0.000151222 0.000074630 0.000239724 -0.000289249 0.000029745 0.000169859 0.000095321 -0.000089388 0.000098189 -0.000022859 -0.000143694 -0.000064778 0.000175746 -0.000175000 0.000065871 -0.000002962 0.000374315 -0.000139892 0.000318065 -0.000131322 -0.000022655 -0.000008159 -0.000149431 0.000594267 -0.000125712 -0.000016362 0.000162558 0.000094193 -0.000099717 0.000018254 -0.000020175 0.000076081 0.000276266 -0.000266199 0.000057295 -0.000001712 0.000261881 0.000258003 -0.000913234 0.000067080 -0.000179114 0.000309364 0.000088814 0.000073595 0.000089530 0.000049546 0.000123478 -0.000048908 0.000034653 -0.000046051 0.000246138 -0.000495000 -0.000025098 -0.000102195 -0.000144449 0.000100806 -0.000712217 0.000003078 -0.000014281 -0.000004119 0.000000481 -0.000003871 0.000004246 0.000012698 -0.000004624 0.000008056 -0.000013859 -0.000003235 0.000014161 0.000002469 -0.000007399 -0.000017218 -0.000010265 0.000014581 0.000003638 0.000006753 -0.000010546 0.000001649 -0.000003187 -0.000000013 0.000008380 -0.000026406 0.000004995 -0.000009113 -0.000000862 -0.000009394 -0.000003923 -0.000000637 0.000013840 -0.000004428 0.000000682 0.000008917 0.000007472 -0.000014371 0.000005548 0.000006697 -0.000040443 0.000007616 -0.000000785 -0.000004939 0.000012816 -0.000035567 -0.000002046 -0.000022654 0.000008340 -0.000015383 0.000017429 -0.000041588 -0.000014996 -0.000007326 -0.000014838 0.000023673 0.000023620 0.000059274 0.000001509 0.000018716 -0.000043084 0.000010160 0.000002970 -0.000002738 0.000006208 -0.000002378 0.000018172 0.000002874 0.000003317 -0.000003838 -0.000016892 -0.000015854 -0.000008577 -0.000002341 0.000014629 -0.000025598 -0.000004993 -0.000000682 -0.000001880 0.000025410 -0.000024736 0.000006175 -0.000002144 -0.000003217 0.000026626 -0.000025087 0.000031000 -0.000005385 0.000005533 0.000018650 -0.000028756 0.000024935 0.000010117 0.000006837 0.000019253 -0.000032948 0.000015403 0.000016516 0.000006247 -0.000013688 0.000009158 -0.000043260 -0.000007193 -0.000010480 0.000011399 -0.000002730 -0.000011941 0.000007753 -0.000007503 0.000003651 -0.000010677 -0.000017787 -0.000013934 -0.000005230 -0.000023106 0.000039572 0.000009130 -0.000001359 0.000006634 -0.000007624 0.000025388 -0.000009448 0.000035333 -0.000005097 0.000003240 -0.000012965 0.000013633 0.000011181 0.000005231 -0.000018797 0.000022226 -0.000013015 -0.000020339 -0.000004834 -0.000002369 0.000005197 -0.000000119 0.000002404 0.000009183 -0.000009757 -0.000011123 -0.000008524 -0.000004538 -0.000004872 0.000008198 0.000001755 0.000000784 0.000008655 0.000006619 -0.000005430 -0.000018917 -0.000005195 0.000003364 0.000000856 -0.000001268 0.000006865 -0.000000040 0.000002967 -0.000002587 0.000012475 -0.000016342 -0.000002406 0.000002321 0.000001750 0.000001129 -0.000003323 -0.000087738 0.000006442 -0.000024347 0.000037647 -0.000007827 -0.000091151 0.000119266 -0.000029126 0.000130364 -0.000098240 0.000065712 0.000047374 0.000034528 -0.000064060 0.000084990 0.000002340 -0.000011793 0.000002409 -0.000006932 0.000008439 -0.000004810 0.000012393 -0.000001186 -0.000000336 0.000002896 0.000006550 -0.000017016 0.000003945 -0.000007152 0.000010800 0.000018568 -0.000032644 0.000009269 0.000001298 0.000004854 0.000007466 -0.000003759 0.000001765 0.000003783 -0.000002419 0.000012187 0.000001483 0.000005242 0.000001784 0.000002997 0.000054833 0.000097756 0.000006325 -0.000063422 -0.000009742 0.000007227 -0.000033761 0.000140124 -0.000132527 -0.000253844 -0.000009562 -0.000049777 0.000053477 0.000019555 -0.000061078 -0.000016098 -0.000043423 0.000010907 0.000036298 -0.000020913 -0.000024144 -0.000000576 -0.000045769 0.000062068 0.000068839 -0.000013985 0.000013111 -0.000022704 0.000020217 0.000042355 0.000027560 0.000031253 -0.000013633 -0.000015918 0.000025554 0.000062500 0.000073802 0.000007985 -0.000069707 -0.000011665 0.000017096 0.000018358 0.000010697 -0.000019850 -0.000018955 -0.000000773 0.000010269 0.000012649 -0.000020523 -0.000033239 -0.000005947 0.000002525 -0.000019916 0.000019881 0.000030274 0.000000549 0.000000015 -0.000014956 0.000012584 0.000025545 0.000012496 0.000022220 0.000023705 -0.000024131 -0.000036248 0.000010595 -0.000001750 -0.000012017 0.000020125 0.000029583 0.000003494 -0.000000175 -0.000004632 0.000008293 0.000011531 -0.000042243 -0.000095675 -0.000045287 0.000059024 0.000050576 -0.000020888 -0.000049884 0.000017763 0.000099935 0.000074748 -0.000012149 0.000020432 0.000067390 -0.000047057 -0.000057895 0.000016571 0.000024172 0.000011273 -0.000035090 -0.000027485 -0.000006342 0.000010273 0.000022741 -0.000019805 -0.000043095 0.000014135 0.000020385 0.000003676 -0.000030890 -0.000010592 -0.000104527 -0.000063338 0.000021107 0.000098380 -0.000072384 -0.000037538 -0.000022801 0.000034868 -0.000014834 -0.000083614 0.000058147 0.000016766 0.000004886 -0.000088940 -0.000009450 -0.000000677 0.000004438 0.000001546 -0.000001312 -0.000005163 -0.000000199 0.000003219 0.000001312 0.000000217 -0.000002065 0.000003201 -0.000002286 -0.000004750 -0.000000215 0.000006762 0.000000863 -0.000000721 0.000003072 -0.000003716 -0.000005330 -0.000008543 -0.000004946 -0.000010697 0.000010550 0.000015142 -0.000007363 -0.000000413 -0.000013844 0.000013349 0.000014421 0.000034773 0.000023836 0.000008900 -0.000002501 -0.000005811 0.000024198 -0.000065514 0.000007066 -0.000050619 0.000040160 -0.000030216 -0.000036640 -0.000018708 0.000008173 -0.000015625 0.000058254 -0.000036736 0.000013516 -0.000044558 0.000020091 0.000060257 -0.000067178 0.000017471 -0.000046742 0.000017813 -0.000014939 -0.000015225 -0.000010791 0.000013215 -0.000021163 0.000026320 0.000018860 -0.000006376 -0.000023999 0.000022862 0.000006219 0.000008656 -0.000031422 0.000035069 0.000061623 -0.000021982 0.000002113 -0.000009301 0.000046110 0.000019176 0.000059993 0.000033907 -0.000006855 -0.000062508 0.000034647 0.000016847 0.000005169 -0.000021166 0.000008263 0.000044765 -0.000060364 -0.000017820 0.000003037 0.000073066 -0.000010958 -0.000025020 -0.000000497 -0.000013471 0.000005888 0.000000892 -0.000001766 0.000008930 -0.000003595 0.000003078 -0.000001506 -0.000002534 -0.000009960 -0.000001100 -0.000002591 0.000001256 0.000051565 0.000008310 0.000029094 -0.000004187 -0.000010528 0.000004549 0.000026704 -0.000001356 0.000007351 -0.000006747 -0.000005906 -0.000030995 0.000006835 -0.000004880 -0.000001945 0.000016001 -0.000014270 0.000013055 -0.000007068 0.000002336 0.000000269 -0.000004372 0.000000247 0.000000240 -0.000000983 0.000007769 -0.000002641 0.000005691 -0.000003418 0.000002184 -0.000015990 0.000000167 -0.000009096 0.000002829 0.000002408 -0.000005573 0.000004342 -0.000004764 0.000002303 -0.000000989 0.000005767 -0.000012950 0.000005981 -0.000004713 0.000002596 -0.000003641 -0.000004275 -0.000000972 -0.000000046 0.000000973 0.000000959 0.000001517 0.000000851 -0.000000407 0.000000639 -0.000003865 -0.000001323 -0.000001767 0.000001476 -0.000000890 -0.000004817 -0.000002936 -0.000002297 0.000001616 -0.000001275 -0.000001415 0.000000384 -0.000000427 0.000000837 -0.000000380 0.000001045 -0.000000639 0.000001087 -0.000000518 0.000000553 -0.000024968 -0.000004939 -0.000014433 0.000004801 0.000002569 -0.000002057 -0.000007591 -0.000000305 -0.000002177 0.000001827 0.000000347 0.000023096 -0.000005688 0.000003707 -0.000001345 -0.000001029 0.000012494 -0.000003307 0.000003856 -0.000003714 -0.000000454 0.000004558 -0.000002624 0.000000649 -0.000001307 -0.000001653 -0.000000408 -0.000000542 -0.000000657 0.000001813 0.000003365 0.000004849 0.000000351 -0.000000899 0.000000607 0.000001552 0.000002647 0.000001289 0.000000566 -0.000000757 -0.000001686 -0.000013728 0.000002487 -0.000000386 0.000000594 -0.000003160 0.000001227 -0.000002438 0.000000988 0.000000223 -0.000003005 0.000000315 -0.000001440 0.000001452 -0.000000214 0.000004010 0.000000247 0.000002591 -0.000001165 0.000000664 0.000012473 0.000031424 0.000003589 -0.000008988 0.000002320 0.000100364 0.000013800 0.000047460 -0.000002769 -0.000017092 0.000002655 0.000034943 0.000000488 -0.000003948 0.000007807 0.000018704 -0.000015730 0.000004977 0.000001261 -0.000001029 0.000025487 0.000068473 -0.000010233 0.000014847 0.000024018 -0.000012816 -0.000004966 -0.000012296 -0.000011174 0.000010959 0.000009288 0.000039476 0.000005114 0.000003926 -0.000005974 0.000005956 0.000042728 -0.000005962 0.000005631 0.000001612 0.000002014 0.000034599 0.000009858 0.000005052 -0.000008669 -0.000003342 0.000020527 -0.000008967 -0.000007520 0.000001118 -0.000012113 -0.000017085 0.000000997 -0.000004792 -0.000001694 -0.000008160 0.000003579 -0.000004077 -0.000005897 -0.000003007 0.000008032 -0.000013958 0.000009984 0.000002414 -0.000002955 0.000008685 -0.000005028 0.000007297 -0.000002576 0.000000246 -0.000002063 -0.000004008 0.000000123 -0.000002037 -0.000000506 -0.000005726 -0.000011619 -0.000001225 -0.000001267 -0.000004058 -0.000004922 -0.000014124 -0.000000504 -0.000000056 -0.000000893 0.000000423 0.000000054 0.000001349 0.000001368 -0.000000697 0.000002434 -0.000030837 0.000002545 0.000004903 0.000002272 0.000014711 0.000077183 0.000005204 -0.000002164 -0.000005583 -0.000006747 0.000000037 -0.000013611 -0.000008548 0.000004863 0.000004350 -0.000013191 0.000008610 0.000002158 -0.000001330 -0.000023056 -0.000012571 -0.000013359 -0.000003189 0.000005978 -0.000011390 -0.000011726 -0.000012765 -0.000010222 0.000001827 0.000004634 0.000005499 0.000002480 -0.000000794 0.000000203 -0.000004463 0.000003412 -0.000008402 0.000000387 0.000007540 0.000013144 -0.000010115 0.000023339 0.000010560 -0.000008348 -0.000002411 -0.000000496 -0.000004140 -0.000003692 0.000000278 -0.000009636 -0.000010301 -0.000007147 -0.000003194 -0.000002190 0.000005555 0.000000285 0.000006109 0.000004195 0.000001426 0.000007167 -0.000037164 -0.000003842 0.000001612 0.000014807 -0.000011599 -0.000084950 -0.000007562 -0.000009175 0.000057465 0.000054937 0.000098475 0.000006375 -0.000027938 -0.000046164 0.000004010 0.000015767 0.000001680 -0.000009066 -0.000001535 0.000003236 0.000015805 0.000007273 -0.000001093 -0.000015767 -0.000007261 0.000009554 -0.000000463 0.000002540 -0.000002891 -0.000027359 -0.000018494 -0.000000967 0.000018333 0.000004675 -0.000004221 -0.000002786 0.000001586 0.000008298 0.000007799 0.000007186 -0.000004575 0.000000484 -0.000012160 -0.000000823 -0.000009959 0.000061028 0.000010205 -0.000039171 -0.000025182 0.000004608 0.000008020 -0.000004744 -0.000017716 0.000007325 -0.000010565 0.000013160 -0.000001577 -0.000006640 0.000010286 -0.000091422 -0.000217807 -0.000000602 0.000298897 0.000001890 -0.000065221 -0.000150969 0.000039624 -0.000221604 -0.000003034 -0.000317894 -0.000160700 -0.000124682 0.000445570 -0.000011699 0.000179117 0.000160391 -0.000029372 -0.000149244 -0.000061642 -0.000335993 -0.000232848 -0.000214615 -0.000188097 -0.000137322 0.000136082 0.000168405 -0.000021221 -0.000509394 0.000030159 -0.000279207 -0.000010526 0.000012577 0.000103610 0.000027366 0.000227194 0.000159670 -0.000043526 0.000079653 0.000019889 -0.000043625 -0.000082958 0.000043112 -0.000080454 -0.000054255 -0.000170411 -0.000010608 0.000036057 -0.000015898 0.000006604 -0.000110900 -0.000136705 -0.000035644 0.000259455 -0.000002507 0.000068877 0.000070514 0.000022266 -0.000111267 0.000001754 0.040749774 -0.001628614 0.077237798 0.009537942 -0.095298412 0.309862631 0.004465686 0.002970778 -0.001724851 0.280545609 -0.008058660 -0.005018472 0.000683986 0.111385795 0.093849476 0.026070952 0.010601643 -0.003952681 -0.056579321 -0.026786681 -0.002351801 -0.000453792 -0.000430136 -0.001256539 -0.021641513 0.001901865 0.011752966 0.008974498 0.000957329 -0.008735811 -0.002587281 -0.021878280 -0.013234043 0.000972753 0.006459187 -0.000005676 0.000321337 0.000051459 0.000005302 0.000038205 0.000417324 -0.000463896 0.000076807 -0.000124589 0.000100048 0.000567445 -0.000654851 0.000211667 -0.000205589 0.000203254 -0.000033539 0.000055903 -0.000050773 0.000042220 0.000196722 -0.000162346 -0.000070370 -0.000049115 0.000457277 -0.000530587 -0.000010820 0.000080906 -0.000042751 0.000348967 -0.000494182 -0.000071896 -0.000025210 -0.000045138 0.000146413 -0.000147946 -0.000440939 0.000481410 -0.000034213 0.000088036 0.000000812 -0.000240240 0.000133007 0.000107189 -0.000189187 0.000294556 -0.000029190 0.000022205 0.000005388 0.000002263 -0.000012229 -0.000019958 0.000051327 0.000019915 0.000001162 -0.000020998 0.000054773 -0.000031653 0.000003517 0.000000328 0.000013998 0.000024807 -0.000019445 -0.000001573 -0.000006651 0.000014899 0.000002047 0.000000389 0.000001682 0.000004147 -0.000002817 0.000021053 -0.000016577 0.000005384 0.000008090 -0.000005003 -0.000013120 0.000027398 0.000006295 0.000000899 -0.000012782 -0.000005132 -0.000022406 -0.000007026 0.000014080 -0.000005451 0.000010405 0.000010421 0.000009881 0.000001393 -0.000003962 -0.000132272 -0.000048169 -0.000004581 -0.001201251 0.000401941 -0.000054007 0.000010477 -0.000001523 0.000594137 0.000535185 0.000130573 0.000059503 -0.000027234 0.000196394 0.000023069 0.000032100 -0.000075593 0.000023455 -0.000772815 0.000553632 -0.000028851 -0.000059857 0.000031946 0.000511567 -0.000503823 0.000024494 -0.000060265 -0.000063377 -0.000209105 -0.000294442 -0.000273718 0.000124630 -0.000175311 -0.000580164 0.000123646 0.000236519 -0.000052860 -0.000019601 0.000148688 -0.000734173 0.000166963 -0.000029810 -0.000352781 -0.000077037 0.000253998 -0.000655950 0.000743762 -0.001148196 -0.000361012 -0.000213213 0.000489671 0.000030849 0.000500734 -0.000082169 -0.000135533 -0.000219394 0.000330599 -0.000443214 0.000020326 0.000034451 -0.000256545 0.000070266 -0.000368309 -0.000681195 0.000105577 -0.000292185 -0.000118589 0.000423137 0.000584189 0.000215491 -0.000115276 0.000084438 -0.000104122 -0.000736792 -0.000014270 0.000041038 -0.000043766 0.000082823 -0.000696509 0.000212464 -0.000030759 -0.000115534 -0.000025081 -0.000178957 0.000035289 0.000034993 0.000133985 -0.000059654 -0.000415230 0.000019644 0.000040606 0.000001142 -0.000041538 0.000004421 -0.000000083 -0.000006281 -0.000008005 0.000009658 -0.000022447 -0.000013314 0.000029133 0.000008865 -0.000029607 0.000045982 -0.000028296 0.000023222 0.000041719 0.000057766 0.000012616 -0.000011960 0.000013238 -0.000067463 -0.000079733 -0.000000517 -0.000020948 -0.000001033 -0.000037015 -0.000002635 -0.000011321 0.000027150 -0.000284456 0.000851393 -0.001083612 0.000404923 -0.000548164 0.001418446 0.001053606 0.001200882 0.000069689 -0.000227060 -0.000771048 0.000994305 0.001156869 -0.000427824 0.000430006 -0.000052887 -0.000117356 0.000022016 0.000085661 -0.000040303 -0.000011704 -0.000005196 -0.000034291 -0.000025417 -0.000001843 -0.000057817 -0.000105657 0.000042581 0.000074563 -0.000034301 0.000012714 -0.000015836 -0.000016314 0.000083504 -0.000133181 0.000030288 -0.000003727 -0.000012508 0.000003919 -0.000071239 -0.000001675 0.000016195 -0.000001987 0.000032371 -0.000053220 -0.000014619 0.000005377 -0.000006830 0.000009344 -0.000008156 0.000034499 -0.000048742 -0.000003777 -0.000025369 0.000021657 0.000013607 -0.000017845 -0.000007251 -0.000007549 0.000008267 0.000010906 -0.000005990 0.000009740 -0.000012408 0.000003204 0.000004185 0.000008379 0.000016078 -0.000007117 -0.000003164 -0.000001059 0.000007697 0.000001729 0.000003146 -0.000001920 -0.000018957 0.000007538 -0.000017008 0.000013544 -0.000010942 -0.000012409 -0.000000274 -0.000017035 0.000012116 -0.000003831 -0.000002551 -0.000001234 0.000000185 -0.000000183 -0.000001146 0.000010926 -0.000005025 0.000013590 -0.000011566 0.000006372 -0.000006129 0.000011994 0.000010749 0.000000731 -0.000006950 -0.000003861 0.000005610 -0.000002468 0.000004841 -0.000000549 0.000001353 -0.000003280 -0.000008749 0.000007980 -0.000002667 -0.000010033 0.000008245 -0.000002651 0.000004105 -0.000009349 -0.000003594 -0.000000902 -0.000005726 0.000001337 -0.000001289 0.000006850 -0.000004649 0.000005768 -0.000006831 0.000004210 -0.000014448 0.000017265 -0.000007159 0.000012766 -0.000007832 0.000019290 -0.000022768 0.000005786 -0.000012594 0.000007742 0.000004396 -0.000005425 0.000002803 -0.000001391 0.000001890 0.000008498 -0.000007995 0.000000977 -0.000007566 0.000004788 0.000000660 -0.000004410 0.000001882 0.000000363 0.000000779 0.000058585 -0.000010941 0.000060069 -0.000047691 0.000013471 0.000059377 -0.000026154 0.000066699 -0.000051162 0.000027513 -0.000006307 -0.000011259 0.000012318 0.000001827 0.000003529 0.000002942 -0.000000031 0.000001885 -0.000001004 -0.000000488 0.000001669 -0.000000089 0.000000943 -0.000000812 0.000000337 -0.000004753 0.000001786 0.000000574 0.000003314 -0.000003831 0.000001294 -0.000001553 -0.000000354 -0.000000637 0.000000658 -0.000001049 0.000002038 0.000000972 0.000001069 0.000001219 -0.000001400 0.000004769 0.000009064 0.000000285 -0.000004074 -0.000061603 0.000250606 0.000522099 -0.000194765 0.000239646 -0.000410348 -0.000632674 -0.000472488 0.000092213 -0.000060306 -0.000013672 -0.000264688 -0.000528684 0.000207437 -0.000245510 -0.000336739 -0.000436628 -0.000161947 -0.000142147 0.000228014 -0.000328900 -0.000755714 -0.000565976 -0.000105966 0.000185424 0.000050837 -0.000239566 -0.000253691 0.000087328 -0.000081799 -0.000013818 0.000003388 -0.000016498 0.000010768 -0.000001283 -0.000034533 0.000020606 -0.000037015 0.000030453 -0.000019298 0.000000407 0.000010054 -0.000010908 0.000003282 -0.000003551 -0.000033999 0.000003081 -0.000033772 0.000023938 -0.000005216 -0.000025132 0.000011524 -0.000022567 0.000020551 -0.000011506 0.000016926 0.000003700 0.000003912 -0.000014191 0.000003275 -0.000018000 -0.000008917 0.000015391 0.000004218 -0.000003410 -0.000002248 0.000000206 -0.000004162 0.000015091 -0.000001577 0.000014521 -0.000003243 0.000004251 -0.000012255 0.000004537 0.000029796 0.000019181 -0.000044259 0.000042050 -0.000026151 -0.000012114 0.000002340 -0.000003509 0.000009674 -0.000032823 0.000001273 -0.000009706 0.000006719 -0.000023292 0.000030330 0.000002537 -0.000000289 -0.000003278 -0.000017326 0.000009506 0.000006623 -0.000000052 -0.000001228 0.000000623 -0.000005787 -0.000010850 0.000000741 -0.000001286 -0.000010395 0.000005566 -0.000009960 -0.000004739 0.000011262 -0.000005274 0.000004472 -0.000002720 0.000000130 0.000000646 0.000007971 -0.000004825 -0.000001785 -0.000003279 0.000004082 -0.000015717 0.000008259 -0.000005204 -0.000002541 0.000004997 -0.000002767 0.000002293 -0.000001151 0.000000479 -0.000000266 -0.000001643 0.000002448 0.000001528 -0.000000614 0.000001779 0.000000736 0.000000417 0.000002447 -0.000000838 0.000002145 0.000002195 -0.000001788 0.000001345 -0.000000063 0.000000343 0.000000851 0.000000104 -0.000001151 -0.000000024 0.000000159 -0.000002600 0.000002315 -0.000010372 -0.000007044 0.000019191 -0.000007860 -0.000000086 -0.000004929 -0.000002431 0.000005733 -0.000011644 0.000002522 0.000001266 0.000006387 -0.000006983 0.000019374 -0.000014033 0.000003582 0.000004306 -0.000007026 0.000018940 -0.000011045 0.000006218 0.000002394 -0.000003051 0.000008766 -0.000007027 -0.000007499 -0.000001023 0.000002747 -0.000004115 0.000007463 0.000000057 0.000001177 -0.000003102 0.000001753 -0.000000787 0.000001936 0.000000436 -0.000002787 0.000001375 -0.000000680 -0.000003254 -0.000003434 0.000005123 -0.000009304 0.000006692 -0.000000580 0.000000052 0.000001224 0.000001268 -0.000001429 0.000001247 -0.000000278 0.000001070 0.000001009 0.000000464 -0.000001401 0.000000069 -0.000001304 -0.000002006 0.000002005 -0.000007913 0.000002558 0.000008383 -0.000014745 0.000007145 0.000006652 -0.000000604 -0.000019649 -0.000006461 0.000015915 -0.000001427 0.000002074 0.000004914 -0.000011636 0.000004003 -0.000000666 -0.000003892 -0.000003798 -0.000005567 0.000009580 -0.000006673 0.000010102 0.000007963 0.000003168 -0.000010554 -0.000001682 -0.000001176 -0.000000437 -0.000001582 0.000001766 0.000001954 0.000003313 -0.000006752 0.000007965 0.000003989 -0.000002477 0.000004657 0.000007797 0.000005137 -0.000009801 0.000001157 0.000006616 -0.000007447 0.000015315 -0.000013516 -0.000002552 0.000001298 0.000000433 -0.000002176 0.000004679 -0.000001209 0.000002042 0.000001686 0.000000689 -0.000007566 -0.000002230 0.000003015 -0.000001517 0.000006690 -0.000009564 0.000000559 0.000001823 -0.000001280 0.000005090 -0.000014120 -0.000000367 -0.000000143 -0.000001485 -0.000007820 0.000005450 -0.000000302 -0.000002011 0.000001725 -0.000006687 0.000009437 0.000000613 -0.000000870 0.000001442 0.000002709 -0.000004115 -0.000000639 -0.000002049 0.000003296 -0.000000549 -0.000002163 0.000000974 -0.000001139 0.000001142 -0.000002972 0.000004041 0.000002102 -0.000004321 0.000007889 -0.000007005 0.000001582 -0.000002207 0.000004362 -0.000008048 0.000007096 0.000000642 -0.000002312 0.000001507 0.000004463 0.000000296 -0.000003547 0.000001498 -0.000003192 0.000002051 -0.000005803 0.000002658 -0.000004348 0.000002777 0.000007577 0.000001801 -0.000009345 -0.000001129 0.000000520 0.000000897 0.000000248 -0.000001411 -0.000001139 0.000001112 -0.000002449 0.000001196 -0.000001212 -0.000001178 0.000001701 0.000000014 0.000001284 -0.000000793 0.000002620 -0.000004199 -0.000000672 -0.000004236 0.000003136 -0.000000887 0.000001400 -0.000000516 0.000001467 -0.000002094 0.000000807 -0.000001065 0.000003113 0.000000347 -0.000000427 0.000000421 -0.000000775 0.000000162 -0.000003136 0.000002659 -0.000021390 0.000002908 -0.000008049 0.000014032 -0.000015429 -0.000065946 -0.000003198 -0.000018801 0.000050832 -0.000040997 0.000058220 -0.000002524 0.000033108 -0.000036418 0.000052159 0.000011559 -0.000002011 0.000007345 -0.000007607 0.000009143 0.000019267 0.000000675 0.000013004 -0.000007197 0.000002671 0.000001042 -0.000002062 -0.000002161 -0.000000734 0.000005259 -0.000025820 -0.000002406 -0.000020569 0.000003427 -0.000005538 -0.000000458 0.000004594 0.000001723 0.000000878 -0.000007904 -0.000001062 -0.000002306 0.000002402 0.000000595 -0.000000919 0.000048377 -0.000007989 0.000017836 -0.000035235 0.000031900 0.000001957 -0.000001596 0.000003260 0.000000913 -0.000003183 0.000010889 0.000000965 0.000002452 -0.000010480 0.000005549 0.000126916 0.000007223 0.000106270 0.000081995 0.000122911 -0.000109347 -0.000042010 -0.000083850 0.000004643 -0.000025278 -0.000093601 0.000050711 -0.000048919 0.000018772 -0.000090027 0.000029286 -0.000056936 -0.000024699 -0.000044126 -0.000026826 -0.000026965 0.000018243 -0.000000920 0.000033987 -0.000020316 0.000091257 -0.000047060 0.000023843 -0.000045710 0.000007395 -0.000019307 0.000084762 0.000045173 -0.000105420 -0.000019787 0.000124958 -0.000045616 0.000062127 -0.000012482 -0.000026616 0.000030619 0.000021205 0.000007215 0.000066774 0.000002215 -0.000066309 -0.000010767 -0.000045177 -0.000017683 -0.000005878 -0.000014610 0.000031930 0.000007103 0.000019897 -0.000009177 0.000011636 -0.000015197 -0.000000186 -0.000015743 0.000006415 0.056419201 -0.018100942 0.044847059 -0.007006505 0.029891876 0.220928883 0.004357069 0.020514765 0.147498282 0.162857566 0.000090210 0.000020532 0.000041468 -0.000106508 0.044155801 -0.000006124 -0.000311170 0.000106949 0.000090451 0.006778900 0.000038326 -0.000234157 -0.000033579 0.000186940 -0.013327897 0.000036419 0.000151968 -0.000109865 -0.000011839 0.000312670 -0.000247475 -0.000041160 0.000257528 -0.000171191 -0.011240764 0.000004637 -0.000161648 0.000291980 -0.000202533 0.024622097 -0.000091099 0.000121828 -0.000024227 -0.000131342 0.002573438 -0.000034710 0.000930291 -0.000441575 0.000140312 0.009976370 0.000052094 0.001027763 -0.000895285 0.000454280 -0.022438749 -0.000006727 0.000005252 0.000002766 -0.000008789 -0.000049948 0.000011556 0.000018606 -0.000014192 -0.000010961 -0.000267238 0.000007830 -0.000033017 0.000001622 -0.000013369 0.000118808 -0.000005647 0.000003700 0.000000748 -0.000000292 0.000069355 -0.000007761 -0.000012463 0.000011552 -0.000013144 0.000070040 0.000009312 -0.000023542 0.000003052 -0.000002512 0.000053870 0.000020613 0.000025405 -0.000031204 0.000009352 -0.000212213 -0.000005184 -0.000036015 0.000014055 0.000000052 0.000179081 0.000005563 -0.000007860 -0.000000108 -0.000008046 -0.000095246 0.000100548 -0.000039125 -0.000025060 -0.000039858 -0.000005212 -0.000053483 -0.000412994 -0.000162209 -0.000032992 -0.000001969 0.000633099 -0.000182208 -0.000162210 0.000095883 0.000044799 -0.000119722 0.000211027 0.000159736 0.000031380 -0.000002146 -0.000154085 0.000090678 0.000025298 -0.000028186 -0.000013103 0.000130409 0.000122918 0.000046824 0.000186454 -0.000012553 0.000092527 0.000165624 0.000167144 0.000265134 0.000011168 0.000040981 0.000017897 0.000060226 -0.000054363 0.000003557 0.000014438 0.000083732 0.000017050 0.000087295 -0.000011335 0.000280165 0.000073093 -0.000196692 0.000072084 0.000031451 0.000365647 -0.000335307 -0.000012776 -0.000178633 0.000052049 -0.000189150 -0.000139607 -0.000055681 -0.000158139 -0.000013770 -0.000197106 -0.000314474 0.000067391 -0.000098539 -0.000002220 -0.000064537 0.000082515 0.000137094 0.000038912 -0.000020358 -0.000558562 0.000127926 -0.000038635 -0.000050036 0.000058346 -0.000217395 -0.000287115 -0.000059733 0.000100241 0.000023945 -0.000196762 0.000248251 -0.000008269 0.000073938 -0.000036994 -0.000037976 -0.000130199 0.000141365 -0.000036948 -0.000038180 0.000087069 -0.000088971 -0.000034072 0.000049773 0.000006701 -0.000055535 0.000041465 0.000034929 -0.000013402 -0.000000066 0.000054820 0.000014519 -0.000024049 0.000062426 0.000009733 0.000040199 -0.000027298 0.000008080 -0.000064629 0.000004312 -0.000022643 0.000127629 -0.000030754 0.000099859 0.000001571 -0.000017999 -0.000034427 0.000015985 0.000022700 0.000004078 0.000417520 0.000202114 -0.000075565 -0.000009963 -0.000033472 0.000352027 -0.000045019 0.000268745 -0.000684967 0.000380249 -0.000294610 -0.000301833 0.000151654 -0.000465535 0.000264814 -0.000036057 0.000054458 -0.000007618 0.000038486 -0.000067687 0.000023354 0.000013395 -0.000020443 0.000021232 0.000012433 -0.000098946 0.000051107 0.000000909 0.000022175 -0.000036141 -0.000046946 0.000058325 0.000027197 -0.000014665 -0.000008504 0.000006330 0.000016476 0.000009316 -0.000001417 0.000001220 0.000024082 0.000031556 0.000002210 0.000002778 0.000012689 0.000029361 -0.000030408 -0.000002766 0.000005962 -0.000006472 0.000027004 -0.000015667 -0.000025091 0.000030510 -0.000000437 0.000009178 -0.000001314 -0.000019392 0.000015642 0.000002282 -0.000014924 0.000018328 0.000009521 -0.000015417 0.000002948 -0.000032912 0.000027314 0.000027394 -0.000031845 0.000005183 -0.000009981 0.000013517 0.000005126 0.000000153 0.000001557 0.000037633 -0.000017157 -0.000030847 0.000018566 -0.000006160 0.000047788 -0.000047926 -0.000018912 0.000027051 -0.000008238 0.000007430 -0.000012156 0.000001652 0.000000513 -0.000001793 -0.000018963 0.000004968 0.000026608 -0.000013259 0.000002363 -0.000017367 0.000007604 0.000024058 -0.000022704 0.000000335 0.000003449 0.000000819 -0.000000942 0.000003837 -0.000000709 0.000010666 -0.000004997 -0.000012437 0.000010597 0.000000126 0.000017784 -0.000001649 -0.000007031 -0.000005931 -0.000002740 0.000011463 -0.000004897 -0.000012441 0.000005159 -0.000000844 -0.000012252 0.000007421 0.000005487 -0.000006261 0.000001986 -0.000000833 0.000011478 -0.000007777 0.000003355 -0.000000041 0.000002229 -0.000009215 0.000003169 -0.000002967 -0.000000220 0.000006159 -0.000016593 0.000005361 -0.000002288 -0.000000840 -0.000003901 0.000009460 -0.000002856 0.000002209 0.000002389 0.000007920 -0.000021182 0.000004897 -0.000000975 -0.000002375 -0.000130331 0.000125582 0.000075435 -0.000095933 0.000029057 -0.000097522 0.000007289 0.000132164 -0.000080136 0.000015224 0.000023658 -0.000092955 0.000034735 -0.000011251 -0.000013133 -0.000003076 0.000003588 0.000003247 -0.000003236 0.000001268 -0.000001432 0.000001568 0.000002241 -0.000000679 0.000000732 0.000002539 -0.000001723 -0.000004693 -0.000005096 -0.000001684 0.000001719 -0.000002356 -0.000000195 0.000001264 -0.000000069 -0.000008088 0.000003362 0.000003365 -0.000000461 0.000000674 -0.000018015 0.000011397 0.000013548 -0.000017983 0.000001296 -0.000152685 -0.000148204 0.000109899 -0.000190452 0.000156647 -0.000056273 0.000071718 -0.000141258 0.000302794 -0.000268070 0.000090026 0.000150002 -0.000031575 0.000180888 -0.000140803 -0.000230316 -0.000074989 -0.000059946 0.000240562 -0.000093755 -0.000228283 -0.000011592 -0.000110903 0.000274522 -0.000218553 0.000027210 0.000094954 -0.000049818 0.000183895 -0.000076039 0.000033797 -0.000035147 -0.000013317 0.000028638 -0.000007131 0.000044872 0.000021149 -0.000081447 0.000037415 -0.000005542 -0.000003117 0.000042269 -0.000021999 0.000010664 0.000006259 0.000074451 -0.000077238 -0.000038600 0.000056587 -0.000018162 0.000035243 -0.000010304 -0.000042689 0.000024005 -0.000007130 -0.000043511 0.000084759 -0.000001825 -0.000008345 0.000014180 -0.000083002 0.000016877 0.000018288 -0.000016674 0.000000138 0.000008881 0.000002137 0.000000156 0.000002183 0.000002532 0.000016768 -0.000003629 0.000002964 -0.000005997 -0.000001620 0.000158196 -0.000019864 -0.000037752 0.000043795 0.000005048 -0.000053720 0.000016373 0.000002879 0.000015717 0.000007154 0.000002991 -0.000015615 -0.000003865 -0.000004181 -0.000005090 0.000038674 -0.000014311 -0.000009328 0.000004622 -0.000004354 0.000008294 0.000001384 0.000001744 -0.000001309 0.000000553 0.000011415 -0.000006957 -0.000005052 0.000001400 -0.000002692 -0.000050419 0.000007880 0.000011492 -0.000011487 -0.000000193 -0.000018415 0.000005329 0.000003867 -0.000001634 0.000001711 0.000006029 -0.000007741 -0.000001737 -0.000003520 -0.000004733 -0.000015719 0.000000606 0.000003748 -0.000005279 -0.000001605 0.000002580 -0.000001394 -0.000001749 0.000001475 -0.000000163 -0.000006081 0.000002138 0.000002801 -0.000002235 0.000000783 -0.000007071 0.000002877 0.000003841 -0.000003366 0.000000932 -0.000000695 0.000000863 0.000000444 0.000000133 0.000000475 0.000001663 -0.000001329 -0.000001091 0.000000458 -0.000000448 -0.000072980 0.000014752 0.000020208 -0.000019564 -0.000000057 -0.000012041 -0.000000828 0.000004643 -0.000008043 -0.000001999 -0.000000516 0.000008145 -0.000000926 0.000006085 0.000004372 0.000003167 0.000005759 -0.000000938 0.000006547 0.000004559 0.000008548 0.000002581 0.000000898 0.000000924 0.000001871 -0.000011010 -0.000001196 0.000000228 -0.000003132 -0.000001204 0.000005975 -0.000000787 -0.000003514 0.000004206 0.000000015 0.000005182 -0.000000200 -0.000003008 0.000004963 0.000000631 -0.000005549 -0.000002737 0.000002345 -0.000005409 -0.000002400 -0.000007150 0.000002416 0.000002253 -0.000001566 0.000000619 -0.000004815 0.000001912 0.000001525 -0.000000756 0.000000715 0.000006258 -0.000002739 -0.000002956 0.000002317 -0.000001077 0.000006757 -0.000008791 0.000005736 -0.000014346 -0.000005697 0.000077209 -0.000024135 -0.000037261 0.000036990 -0.000006770 0.000021538 -0.000003987 0.000005148 -0.000013260 -0.000004349 0.000012586 -0.000004145 -0.000008863 0.000008930 -0.000002537 -0.000013556 0.000008572 0.000016629 -0.000021656 0.000000695 0.000007068 -0.000007420 -0.000002873 0.000002490 -0.000001740 0.000005804 0.000002448 -0.000008542 0.000012474 0.000001485 -0.000025302 0.000010826 0.000015707 -0.000017061 0.000001278 0.000002590 0.000003910 -0.000001791 0.000006732 0.000005446 -0.000003470 0.000000369 -0.000001590 0.000001314 -0.000001378 0.000005546 -0.000003989 0.000005789 -0.000007975 0.000001528 -0.000003097 0.000000880 0.000003141 -0.000001787 0.000002314 0.000003686 -0.000000377 0.000004157 -0.000003828 0.000002849 0.000017334 -0.000006303 -0.000006120 0.000003577 -0.000002691 0.000004178 -0.000003462 -0.000002477 0.000000473 -0.000002253 -0.000005276 0.000000095 0.000004990 -0.000004536 0.000001331 -0.000007894 0.000000316 0.000005350 -0.000006145 0.000000291 -0.000000489 0.000000091 -0.000000889 0.000000168 -0.000000691 -0.000008774 0.000000050 0.000008226 -0.000011896 -0.000000837 0.000004250 0.000001807 -0.000010480 0.000014017 0.000000455 -0.000006872 0.000000237 0.000007928 -0.000010394 -0.000000608 0.000007082 -0.000004439 -0.000000057 -0.000002365 -0.000001658 -0.000015323 0.000002992 0.000015851 -0.000018969 0.000001644 0.000002100 -0.000003226 0.000003123 -0.000004022 -0.000000799 0.000005372 -0.000001577 -0.000002696 0.000003193 -0.000000215 -0.000003267 0.000002440 0.000000645 -0.000000340 0.000000436 0.000005936 -0.000002374 -0.000004212 0.000004044 -0.000000148 0.000000947 -0.000000402 0.000000835 -0.000000785 0.000000091 -0.000008299 0.000001143 0.000005330 -0.000005622 0.000000291 0.000002572 -0.000000068 -0.000002384 0.000001615 -0.000000449 0.000016635 -0.000016793 -0.000028380 0.000025063 -0.000011608 0.000032002 -0.000033596 -0.000016091 0.000061763 -0.000016126 -0.000018038 -0.000060583 0.000071989 -0.000088840 0.000017494 -0.000006156 0.000007763 0.000006420 -0.000017330 0.000001855 -0.000007724 0.000010721 0.000016810 -0.000021669 0.000004159 -0.000002549 0.000003080 -0.000003856 -0.000000455 0.000008054 -0.000004582 0.000033203 -0.000024376 0.000032799 -0.000009705 0.000001241 0.000016478 -0.000003889 0.000002897 -0.000012398 0.000003289 -0.000008173 0.000002643 -0.000000449 -0.000002081 -0.000022266 0.000035971 0.000016946 -0.000036139 0.000014133 0.000004717 -0.000004008 0.000005785 -0.000004759 -0.000003028 -0.000005505 0.000023071 -0.000006892 -0.000004812 -0.000003180 0.000140896 -0.000612841 0.000285291 -0.000112822 0.000038113 -0.000060086 0.000216201 -0.000244907 0.000074070 -0.000001111 -0.000120027 0.000253242 -0.000146125 -0.000025503 -0.000019592 -0.000054855 0.000142231 -0.000031820 0.000047787 -0.000006370 0.000033726 -0.000068122 0.000006756 -0.000006545 -0.000013769 -0.000006472 0.000042185 0.000000218 -0.000029594 0.000013649 -0.000193472 -0.000420741 -0.000107138 -0.001064141 0.000008129 -0.000020324 -0.000194388 0.000195629 -0.000205026 0.000011263 0.000145564 -0.001080810 0.000153820 -0.000399336 -0.000005287 -0.000080529 0.000205255 -0.000138704 0.000052316 -0.000002731 0.000007982 -0.000024722 0.000022198 -0.000010077 -0.000002385 -0.000019717 0.000059734 -0.000030528 -0.000004822 0.000004958 0.111328209 -0.128631353 0.266295267 0.001130295 -0.000667252 0.254191451 -0.007695780 -0.002671008 0.134024341 0.125533096 0.014161993 0.002083480 0.000695349 -0.002220801 0.039496923 -0.003274530 0.000250330 -0.017093376 0.018606215 -0.000502489 -0.008776755 -0.002261408 -0.014293623 0.013023953 -0.000851157 0.016791224 0.000949038 -0.000424808 0.000066444 -0.001448509 -0.000086460 -0.000086736 -0.000007627 0.000049341 -0.000028425 -0.000074263 -0.000194424 0.000016442 0.000108869 -0.000104135 0.000072427 0.000150265 -0.000026057 -0.000064649 0.000035910 0.000041061 0.000093279 -0.000013423 -0.000038236 0.000021573 -0.000024000 0.000048297 -0.000072349 0.000020334 0.000013851 0.000027951 0.000051891 -0.000007694 -0.000017120 0.000031818 0.000034477 -0.000162338 0.000088800 0.000011526 -0.000066902 -0.000015145 0.000090071 -0.000078989 -0.000042704 0.000062379 0.000074336 -0.000015755 -0.000028754 0.000009971 -0.000070621 0.000006956 0.000008861 -0.000002923 0.000018509 0.000003211 0.000025261 0.000027636 0.000000031 -0.000027692 -0.000013109 -0.000013943 -0.000042182 0.000038718 -0.000106456 0.000012132 -0.000015512 -0.000011508 -0.000006983 0.000025001 -0.000000528 -0.000026182 -0.000019159 -0.000010663 0.000052461 -0.000009655 -0.000002117 0.000008582 -0.000000136 -0.000005625 -0.000014555 -0.000004773 -0.000000028 0.000001986 -0.000013856 -0.000000725 -0.000019347 -0.000014142 -0.000006145 0.000015730 -0.000006938 -0.000025740 -0.000015609 -0.000014445 0.000064470 -0.000009839 0.000006125 -0.000006108 0.000011827 -0.000030553 0.000025602 -0.000005653 -0.000041742 0.000012631 -0.000065736 0.000038263 0.000024002 0.000025420 0.000005066 -0.000044990 -0.000031585 -0.000015298 0.000001316 0.000019569 -0.000034691 -0.000026052 0.000018355 0.000023168 -0.000019004 0.000023400 -0.000008624 0.000035143 -0.000005861 -0.000012112 -0.000017499 0.000066761 -0.000002621 -0.000014864 0.000032686 -0.000065030 -0.000004585 0.000006691 0.000019854 -0.000014798 0.000057317 -0.000000671 -0.000003793 0.000019510 -0.000005345 0.000015658 -0.000040394 -0.000000252 -0.000006376 -0.000001910 -0.000003274 0.000004993 0.000000355 0.000004276 -0.000002346 0.000001684 -0.000005089 -0.000004593 -0.000012456 0.000002692 -0.000013625 0.000005229 0.000007997 0.000004740 -0.000001962 -0.000007030 0.000001977 -0.000007294 -0.000004011 0.000002248 -0.000004251 -0.000006449 -0.000004105 -0.000004610 -0.000001882 0.000002933 -0.000000699 0.000103750 0.000122879 -0.000001056 -0.000116485 -0.000044082 -0.000056017 -0.000123974 -0.000000589 -0.000262130 0.000041833 -0.000091701 -0.000138155 -0.000017723 0.000031779 0.000138859 -0.000000690 0.000033928 -0.000000384 0.000060537 -0.000025277 0.000022206 0.000004180 0.000000738 -0.000031116 0.000023546 0.000006453 0.000023217 -0.000017496 0.000078168 -0.000008487 -0.000000021 0.000002249 -0.000022722 0.000064936 0.000012392 -0.000004645 -0.000003844 -0.000006745 0.000014909 0.000004778 0.000007788 -0.000005129 0.000000105 -0.000001765 0.000026843 -0.000010435 -0.000019469 0.000007148 0.000011829 0.000018420 0.000037485 0.000058078 -0.000000228 0.000001965 -0.000011767 0.000008655 0.000013335 -0.000003030 0.000001141 -0.000001832 0.000012550 0.000019283 -0.000003195 -0.000005635 -0.000009994 0.000003119 0.000006645 -0.000003441 -0.000010109 -0.000010546 -0.000004015 -0.000007224 -0.000000886 -0.000003439 -0.000000582 -0.000010583 -0.000022578 0.000007388 0.000012354 0.000020581 -0.000007124 -0.000016456 0.000007510 0.000015144 0.000020011 0.000001049 0.000000623 0.000002095 0.000003369 0.000003152 0.000007339 0.000015907 -0.000003126 -0.000005376 -0.000011350 -0.000006154 -0.000008262 0.000000790 -0.000002366 -0.000000006 -0.000004605 -0.000008287 0.000000212 0.000001010 0.000003202 0.000000816 -0.000002870 0.000002621 0.000001314 0.000006494 -0.000004153 -0.000010446 0.000004849 0.000006409 0.000011436 0.000000102 -0.000002874 0.000000953 0.000002765 0.000004362 0.000011679 0.000017027 -0.000001908 -0.000004513 -0.000008669 -0.000022560 -0.000033184 -0.000002328 0.000002954 0.000008495 0.000017791 0.000027359 0.000001113 -0.000001454 -0.000006920 0.000003375 0.000006661 0.000001005 0.000001269 -0.000000606 0.000006115 0.000010769 -0.000001973 -0.000002606 -0.000005012 -0.000000028 0.000002450 0.000002806 0.000002943 0.000001629 0.000038283 0.000070398 -0.000022013 -0.000048151 -0.000060951 0.000040016 0.000082506 -0.000014197 -0.000029531 -0.000055708 -0.000004006 0.000006679 0.000011311 0.000016324 0.000005805 0.000001371 0.000002154 -0.000000339 -0.000001897 -0.000001495 0.000001306 0.000001404 -0.000000621 -0.000000972 -0.000000724 -0.000003838 -0.000004419 0.000002408 0.000002054 0.000002877 0.000000853 0.000001668 0.000000109 0.000000057 -0.000000475 -0.000001679 -0.000002130 -0.000001289 -0.000001791 -0.000001824 -0.000001886 -0.000001249 0.000000752 -0.000003742 -0.000002419 -0.000127776 -0.000111685 0.000002559 0.000014684 0.000036352 0.000068062 0.000088306 -0.000001431 0.000124241 -0.000052632 0.000021279 0.000045613 0.000014948 -0.000009640 -0.000076239 -0.000033378 -0.000019043 0.000004275 0.000110123 0.000003144 0.000010689 0.000036326 0.000000676 0.000147287 -0.000034749 0.000009678 0.000030290 0.000008075 -0.000000974 -0.000042120 -0.000008608 -0.000017696 0.000004363 0.000012012 0.000015108 -0.000024823 -0.000050734 0.000006622 0.000012153 0.000029955 -0.000000581 -0.000010439 -0.000005409 -0.000006812 0.000001462 -0.000020628 -0.000036837 0.000013054 0.000029486 0.000034142 -0.000017400 -0.000033094 0.000006541 0.000012160 0.000021468 0.000011946 0.000012418 -0.000012357 -0.000020235 -0.000017394 -0.000001651 0.000001639 0.000001901 -0.000006612 -0.000007427 -0.000002282 -0.000004273 0.000001600 -0.000004617 0.000000535 0.000001115 0.000004586 -0.000000563 0.000001480 -0.000003395 -0.000001554 -0.000012670 -0.000000087 0.000006855 0.000019333 -0.000005472 -0.000014003 0.000003827 -0.000008800 0.000007533 0.000004291 0.000012121 -0.000003281 0.000006382 -0.000006996 0.000004683 0.000004456 -0.000004546 0.000013418 0.000005594 -0.000000758 -0.000000169 0.000000519 -0.000000619 -0.000000354 0.000002214 0.000000799 -0.000001725 0.000006897 0.000004071 -0.000000128 0.000001592 0.000000951 -0.000003829 -0.000004248 -0.000001735 -0.000002480 0.000002273 -0.000005031 -0.000000920 0.000003005 0.000005574 -0.000003032 0.000009182 0.000000008 0.000000447 0.000002321 -0.000000448 0.000000990 -0.000002289 0.000000797 0.000000320 -0.000000796 0.000001071 0.000000796 -0.000000348 0.000000938 0.000000304 -0.000002343 -0.000002221 -0.000000602 0.000000947 0.000000733 -0.000003089 -0.000002718 -0.000000073 0.000000369 -0.000000221 -0.000000956 -0.000000931 0.000000696 0.000000642 -0.000000743 0.000001421 0.000000511 -0.000000607 0.000004184 0.000001078 -0.000006645 -0.000009262 0.000001779 0.000003238 -0.000000388 0.000003223 0.000000013 -0.000003927 -0.000009306 0.000003973 -0.000007957 0.000003345 -0.000003105 -0.000006424 0.000003199 -0.000008140 0.000001342 -0.000001458 -0.000003144 0.000002319 -0.000003747 0.000001047 0.000000834 0.000001174 -0.000000521 0.000001686 0.000000164 -0.000000564 -0.000002176 0.000000118 0.000000680 0.000001855 -0.000000435 -0.000000830 -0.000000590 -0.000000447 -0.000000076 0.000001844 0.000005906 -0.000002306 0.000003457 -0.000003670 -0.000000371 -0.000000528 0.000000653 -0.000001822 -0.000000527 -0.000000230 0.000000520 -0.000000120 -0.000001715 -0.000001571 0.000000607 0.000000164 -0.000001050 0.000002873 0.000001209 0.000001542 0.000004506 -0.000002224 0.000010882 -0.000000017 -0.000001277 0.000003965 -0.000010289 0.000018412 -0.000002769 0.000001354 0.000005633 -0.000004314 0.000008244 -0.000001732 -0.000000984 0.000001724 -0.000003175 0.000002240 -0.000005023 -0.000005282 -0.000006863 0.000000720 0.000001233 0.000003226 0.000000033 -0.000000169 0.000001113 0.000001688 0.000001546 -0.000004304 -0.000006100 0.000001467 -0.000005025 -0.000002745 -0.000003509 -0.000003822 0.000001902 -0.000004292 -0.000002221 -0.000001822 -0.000011733 0.000006726 -0.000005480 0.000014115 -0.000000616 -0.000000723 -0.000001630 0.000000915 -0.000002442 0.000004637 -0.000000007 0.000004453 0.000003275 0.000012603 0.000001755 -0.000005478 0.000005085 -0.000002191 0.000011074 0.000002383 -0.000002315 0.000002086 0.000002977 0.000012381 0.000001519 0.000003524 -0.000003781 0.000007255 -0.000000446 0.000000552 0.000004221 -0.000001801 0.000001131 -0.000005747 0.000001655 -0.000000639 0.000005078 -0.000004572 0.000003069 0.000001439 0.000001556 0.000001503 -0.000001238 0.000000826 -0.000000478 0.000002455 -0.000002217 0.000000876 -0.000004267 0.000001927 0.000008448 -0.000003874 0.000001970 -0.000006393 -0.000005499 -0.000008475 -0.000001314 -0.000000577 -0.000000005 0.000001199 -0.000000238 0.000002379 -0.000000963 0.000001868 0.000000996 0.000005830 -0.000002465 0.000004770 -0.000003033 0.000003110 -0.000001925 0.000006571 -0.000002238 0.000009447 0.000002011 -0.000000511 0.000004957 -0.000001613 0.000003477 -0.000000193 -0.000001848 0.000000291 0.000001500 0.000002884 -0.000000839 -0.000001985 -0.000000216 -0.000000766 0.000000394 0.000000386 0.000004860 -0.000003964 0.000003585 -0.000002756 0.000000816 -0.000001689 0.000001683 -0.000000318 0.000003131 0.000001082 0.000001100 0.000002999 -0.000003941 -0.000001425 -0.000000556 0.000002351 -0.000004521 0.000003708 -0.000002459 -0.000015104 -0.000027735 0.000008162 0.000031642 0.000019025 -0.000014575 -0.000010217 0.000022108 0.000028120 0.000070638 0.000050619 0.000053589 -0.000006936 -0.000097973 -0.000120227 0.000013325 0.000015699 0.000001781 -0.000025686 -0.000022903 0.000011943 0.000015026 -0.000002738 -0.000012167 -0.000012132 0.000004281 0.000005986 -0.000002262 -0.000010393 -0.000007872 -0.000011555 -0.000018724 0.000005309 0.000008408 0.000008408 -0.000000623 -0.000008270 0.000005024 0.000003577 0.000000419 -0.000002129 -0.000000430 0.000001298 0.000006422 0.000006084 0.000023370 0.000031138 -0.000007850 -0.000035702 -0.000046348 -0.000001423 -0.000001966 0.000002173 -0.000000547 -0.000006081 0.000005422 0.000001930 0.000001997 -0.000008812 -0.000012562 0.000032357 0.000041851 -0.000006675 -0.000055229 -0.000041032 -0.000014040 -0.000013851 0.000002858 0.000019812 0.000012359 -0.000056029 -0.000079242 0.000012899 0.000060603 0.000073013 0.000048025 0.000070068 -0.000004237 0.000004641 -0.000015767 -0.000021202 -0.000036094 0.000011363 0.000022166 0.000031177 0.000051538 0.000081122 -0.000002969 -0.000011282 -0.000016598 -0.000022364 -0.000019349 0.000003081 -0.000022448 -0.000016079 0.000043218 0.000071968 -0.000004323 -0.000017682 -0.000029227 -0.000018637 -0.000022301 0.000015101 0.000015417 0.000021170 -0.000016962 -0.000026158 0.000000596 0.000000533 0.000004524 -0.000015116 -0.000028448 0.000002154 0.000002493 0.000004961 0.000011214 0.000019933 -0.000002612 -0.000007458 -0.000008007 0.215503271 -0.146508479 0.164494347 0.009191880 -0.010712547 0.040511477 0.000002836 0.000030693 -0.000016556 0.231224504 0.000011913 -0.000007588 0.000038915 -0.099634978 0.106144659 0.000007182 0.000049589 -0.000004010 0.106094153 -0.050203835 0.000010451 0.000038025 0.000005705 -0.014814048 -0.005947013 0.000025003 0.000176394 -0.000014867 0.011476069 0.003484640 0.000002659 0.000005897 -0.000004356 -0.011429054 -0.003482032 -0.000073015 -0.000345321 0.000080823 0.006483706 0.024062542 -0.000017595 0.000111703 -0.000028766 -0.003661021 -0.009105976 0.000039981 0.000109586 0.000146408 0.004394493 0.012318530 0.000010657 -0.000018886 -0.000022423 -0.000002032 -0.000005367 -0.000002592 -0.000035431 -0.000037983 -0.000000349 -0.000000210 -0.000045545 0.000017858 0.000022586 0.000000858 0.000007104 0.000005337 0.000018324 0.000015188 0.000000328 -0.000002515 0.000010455 0.000018585 0.000018809 -0.000002768 -0.000009435 0.000003442 0.000017437 0.000023950 0.000001894 0.000002561 -0.000001259 0.000015092 0.000013713 0.000002498 0.000003920 0.000005658 0.000029006 0.000016521 -0.000000443 -0.000002151 0.000015518 0.000018545 0.000013910 -0.000001583 -0.000008051 -0.000009592 0.000003442 0.000009801 -0.000000897 0.000001695 -0.000029036 -0.000010805 -0.000029542 -0.000004705 -0.000008324 -0.000004649 -0.000008860 -0.000004352 0.000006245 0.000015691 -0.000009650 0.000006792 0.000010479 0.000003467 0.000002631 0.000011680 -0.000009315 -0.000004663 0.000002451 0.000006305 -0.000010232 -0.000018455 -0.000038103 0.000000259 0.000007912 -0.000026718 0.000000311 -0.000001158 0.000001435 0.000005198 0.000010240 -0.000021149 -0.000004526 -0.000003684 -0.000006084 0.000013110 0.000003904 0.000012920 0.000004050 0.000004120 0.000000305 -0.000003144 -0.000005317 -0.000002438 -0.000002822 0.000002151 0.000004158 0.000000984 0.000000559 0.000000591 -0.000004980 0.000005964 0.000005996 -0.000001314 -0.000000529 0.000000103 -0.000006161 -0.000008525 0.000000017 0.000003027 -0.000001831 0.000016396 0.000017541 0.000001902 0.000002291 0.000001743 0.000000791 -0.000003718 -0.000003291 -0.000006427 -0.000013898 -0.000002762 0.000054757 0.000029141 0.000090169 -0.000070169 0.000156266 -0.000088865 0.000072772 0.000201742 0.000000218 0.000000647 -0.000191246 -0.000007505 0.000007497 0.000023365 -0.000009244 0.000022751 -0.000002729 -0.000007099 -0.000013243 -0.000007741 -0.000002519 0.000001566 0.000006846 0.000031292 -0.000001096 0.000005397 -0.000003328 -0.000005452 0.000029498 0.000006167 -0.000000132 -0.000002027 -0.000006922 0.000005643 0.000005617 0.000001548 -0.000000101 -0.000001479 -0.000002325 -0.000000773 -0.000000710 -0.000000501 0.000001518 -0.000004090 -0.000009608 0.000003363 0.000002079 -0.000003216 0.000002039 -0.000016136 -0.000036896 0.000002538 0.000002672 0.000004099 -0.000003162 -0.000010483 -0.000000865 -0.000001706 0.000001213 0.000004907 -0.000003397 -0.000001205 0.000003168 0.000000976 0.000009895 0.000005353 -0.000001451 0.000001913 0.000000754 0.000003965 0.000006138 -0.000000515 -0.000001081 -0.000004425 -0.000008874 0.000006583 0.000000714 -0.000003552 -0.000004027 -0.000012894 0.000000405 0.000001920 -0.000003548 -0.000001396 -0.000002720 -0.000001670 0.000000432 0.000000082 0.000002170 0.000001890 -0.000007573 0.000000734 0.000001749 -0.000001381 0.000004583 0.000007418 0.000000262 0.000000871 -0.000000145 0.000000935 0.000004930 -0.000000252 -0.000000965 -0.000001439 -0.000003055 0.000000448 -0.000000288 -0.000001961 -0.000003534 -0.000003094 0.000005185 0.000000122 -0.000000919 -0.000000353 -0.000001460 0.000001611 -0.000000795 -0.000001205 -0.000000657 0.000003216 -0.000002475 -0.000000008 0.000003531 0.000003035 0.000006034 0.000013704 -0.000001687 -0.000003201 -0.000001644 -0.000004742 -0.000013471 0.000001777 0.000003708 -0.000000916 -0.000001871 -0.000003980 0.000000936 0.000002093 0.000002822 -0.000001750 -0.000008035 -0.000000715 -0.000002056 -0.000002372 -0.000004118 -0.000003870 0.000002154 0.000002078 0.000012407 0.000037315 -0.000011435 -0.000010805 0.000007484 0.000009875 0.000010830 -0.000035147 0.000005741 0.000009690 -0.000009610 -0.000017775 -0.000015597 0.000013784 0.000008926 0.000000224 0.000001067 -0.000000262 -0.000000336 -0.000000075 0.000000587 0.000000379 -0.000000227 -0.000000006 -0.000000325 -0.000002552 -0.000000557 0.000001719 0.000001097 0.000001738 -0.000000120 -0.000000609 -0.000001312 0.000000279 0.000000247 0.000000752 0.000002151 0.000002074 -0.000000234 -0.000000009 -0.000001787 0.000003861 0.000003556 0.000000430 0.000001329 -0.000009607 0.000041627 -0.000082277 0.000006741 -0.000010715 0.000038882 -0.000079704 0.000076318 -0.000035664 -0.000088463 -0.000002422 -0.000011031 0.000077476 0.000002485 -0.000027411 0.000018323 -0.000038125 0.000011999 -0.000034002 -0.000106610 0.000038766 -0.000063505 0.000059675 -0.000036192 -0.000112536 -0.000001292 0.000001137 0.000054330 0.000005148 -0.000007166 -0.000001471 -0.000009889 0.000002954 0.000002289 -0.000003690 -0.000005017 -0.000000030 0.000025872 -0.000006444 -0.000005920 0.000005117 0.000009282 0.000012439 -0.000008334 -0.000006139 -0.000006753 -0.000025290 0.000001809 0.000008394 -0.000004821 -0.000005276 -0.000004008 0.000014582 -0.000000745 -0.000001696 0.000010512 0.000016263 0.000004670 -0.000010277 -0.000007191 -0.000003717 0.000005339 0.000004595 0.000001245 0.000001689 -0.000002869 0.000003209 0.000004066 -0.000000394 -0.000000080 0.000000857 -0.000001954 -0.000003927 0.000000470 0.000000267 0.000003144 -0.000004148 -0.000000817 -0.000002586 -0.000004066 -0.000004769 0.000007303 0.000011064 -0.000001006 -0.000000540 0.000004060 -0.000005325 -0.000010007 0.000001154 0.000000816 0.000007416 -0.000007469 -0.000007168 -0.000000927 -0.000002077 -0.000000544 0.000000314 -0.000000351 0.000000425 -0.000000134 0.000003063 -0.000003857 -0.000001969 -0.000000834 -0.000001400 -0.000001941 0.000002256 0.000002238 0.000000701 0.000001008 -0.000003264 0.000002500 0.000003150 0.000000212 0.000000348 0.000004894 -0.000005157 -0.000005670 -0.000000177 -0.000001021 0.000000591 -0.000000559 -0.000000880 0.000000388 0.000000086 0.000000945 -0.000000423 -0.000000294 -0.000000218 0.000000082 -0.000000897 0.000001278 -0.000000012 0.000000482 0.000000809 -0.000001517 0.000001512 0.000000051 0.000000646 0.000000849 -0.000000045 0.000000722 0.000000032 0.000000164 0.000000427 0.000000976 -0.000000646 -0.000000630 -0.000000145 -0.000000050 -0.000003076 0.000004369 0.000002020 0.000001431 0.000002389 0.000001048 -0.000002126 -0.000002028 0.000000356 -0.000000125 -0.000005323 0.000004668 0.000007768 -0.000000607 -0.000000035 -0.000004715 0.000004495 0.000005381 -0.000000133 0.000000426 -0.000002892 0.000001476 0.000002389 -0.000000046 -0.000000083 0.000000730 -0.000000964 -0.000000352 0.000000049 0.000000061 0.000000187 -0.000000292 0.000000972 -0.000000505 -0.000000611 0.000000495 0.000000570 0.000000147 -0.000000226 -0.000000045 0.000002685 -0.000001723 -0.000004274 0.000000574 0.000000498 -0.000001048 0.000000958 0.000001114 0.000000112 0.000000284 -0.000000325 0.000001135 0.000000204 0.000000250 0.000000617 0.000001652 -0.000001243 -0.000000791 -0.000000431 -0.000000588 0.000004393 -0.000004725 -0.000004468 0.000000577 -0.000000477 0.000014060 -0.000008186 -0.000013832 -0.000000633 -0.000001556 0.000005508 -0.000003201 -0.000005077 0.000000473 -0.000000207 0.000003563 -0.000002622 -0.000004719 -0.000000160 -0.000001240 0.000000581 0.000002699 0.000004120 0.000000185 -0.000000039 -0.000000863 -0.000002966 -0.000000944 0.000000483 -0.000000668 -0.000001894 0.000002765 0.000003231 -0.000000633 0.000000099 -0.000003162 0.000004568 0.000004929 0.000000304 0.000000952 -0.000005567 0.000001065 0.000007809 -0.000001304 -0.000002168 0.000000442 0.000001561 0.000002481 -0.000000086 0.000001042 -0.000002513 -0.000003029 0.000001433 0.000000253 -0.000000233 -0.000004730 -0.000000849 0.000006212 -0.000000458 -0.000000997 0.000000155 -0.000001760 0.000000547 -0.000000268 -0.000001637 0.000004855 -0.000002605 -0.000004171 -0.000000061 -0.000000091 0.000001236 -0.000000718 -0.000003091 0.000000362 0.000000953 -0.000005249 -0.000001387 0.000001464 0.000000226 -0.000000364 -0.000001426 -0.000000666 -0.000000465 0.000000354 -0.000000240 0.000001607 0.000001000 -0.000002049 0.000000295 0.000000947 0.000003078 0.000001186 -0.000005535 0.000001161 0.000002195 0.000001304 0.000002593 0.000003663 -0.000001272 -0.000001053 -0.000003363 -0.000000056 0.000003398 0.000000463 0.000000907 0.000003325 -0.000001931 -0.000006558 0.000000819 0.000000388 -0.000005445 -0.000001062 0.000005120 0.000000285 -0.000000916 -0.000005216 -0.000002876 0.000002414 0.000000323 -0.000000212 0.000000587 -0.000001166 0.000000523 -0.000000373 -0.000000931 0.000000047 0.000001209 0.000002066 -0.000000249 -0.000000185 0.000005336 -0.000000971 -0.000007319 0.000000135 -0.000000452 -0.000001799 -0.000000580 0.000002517 -0.000000190 -0.000000110 -0.000004323 0.000000306 0.000001506 0.000000468 0.000001029 0.000004973 0.000001122 -0.000003083 -0.000000010 0.000000357 -0.000007988 -0.000005188 0.000006447 -0.000006958 0.000069125 -0.000011542 -0.000051299 -0.000033544 0.000021737 0.000067209 0.000019177 0.000040854 0.000031953 0.000013898 0.000009965 0.000002909 -0.000001979 0.000001549 0.000019406 0.000005288 0.000004117 0.000004478 0.000000685 0.000002396 0.000006165 0.000002960 0.000008578 0.000001721 -0.000029934 -0.000026090 -0.000002582 -0.000012038 0.000000187 0.000017351 0.000013512 -0.000002050 -0.000016118 0.000001815 0.000053853 0.000032447 -0.000002562 -0.000003197 -0.000003801 0.000001646 -0.000025310 0.000010213 0.000012475 0.000000540 0.000000334 -0.000028443 -0.000002414 -0.000004324 -0.000000477 -0.000003318 0.000036323 0.000000648 -0.000009835 -0.000000157 0.000028758 0.000023771 0.000006846 0.000086297 0.000066600 -0.000018067 -0.000027278 0.000006982 -0.000025585 -0.000032253 0.000000981 -0.000089702 -0.000005236 -0.000016480 0.000013999 -0.000043010 0.000089272 0.000000235 -0.000014656 -0.000034748 0.000012176 0.000018075 -0.000008432 -0.000009631 0.000013048 -0.000020214 0.000048192 0.000004983 -0.000016922 -0.000043514 -0.000019283 0.000026887 0.000000405 0.000022382 0.000024455 0.000014955 0.000007690 -0.000000849 0.000024783 -0.000001909 0.000007731 0.000000372 -0.000011497 0.000015999 0.000028880 0.000019856 -0.000004407 0.000000555 -0.000010439 -0.000003892 -0.000001388 -0.000011831 0.000000179 0.000008504 0.000020989 0.000006071 0.000007722 0.000002141 -0.000002439 -0.000012868 -0.000004444 0.000001698 0.116830031 0.012592907 0.263327947 -0.008107987 0.044516828 0.058103403 0.010446407 -0.131074762 -0.020097969 0.141210867 -0.002341363 -0.000431064 -0.025494008 0.002541779 0.053499648 0.002099939 0.000843527 -0.000498804 0.001001102 0.045440412 0.000508104 -0.000211852 0.015238320 -0.000240506 -0.004120789 0.000002066 0.000003736 0.000002274 -0.000000957 -0.000006755 -0.000000849 0.000001540 0.000002990 -0.000002417 -0.000003324 -0.000009125 -0.000002978 -0.000007272 -0.000002911 0.000012080 0.000003036 -0.000001092 -0.000002489 0.000002703 0.000000867 0.000002745 0.000002631 -0.000003123 0.000001442 -0.000004298 -0.000006807 -0.000003047 -0.000000675 -0.000002164 0.000003749 -0.000004587 -0.000002671 -0.000001996 -0.000001433 0.000004773 -0.000007231 -0.000000041 -0.000003496 -0.000004241 0.000000995 0.000005216 0.000001529 -0.000002463 0.000002714 -0.000003982 -0.000000757 0.000002643 -0.000002449 -0.000000045 0.000002306 -0.000004608 0.000004229 -0.000005315 -0.000003560 -0.000001137 -0.000005444 -0.000007565 0.000006014 -0.000000528 0.000007991 -0.000001649 -0.000003710 -0.000001607 0.000000655 0.000004300 0.000008101 -0.000002169 0.000005979 0.000004832 -0.000000931 0.000001172 0.000001207 0.000002242 -0.000000803 0.000001456 -0.000006434 -0.000002836 -0.000004227 -0.000002568 0.000008183 0.000003745 0.000004250 0.000001685 0.000000907 -0.000005315 0.000004245 -0.000004972 0.000004011 0.000004189 0.000000976 -0.000005465 0.000003710 0.000000428 -0.000004782 -0.000003329 -0.000002012 -0.000000781 -0.000000579 -0.000000910 0.000000949 -0.000004375 0.000001623 -0.000000902 -0.000002931 0.000000023 -0.000003823 0.000001543 0.000002062 -0.000003247 -0.000000706 -0.000001628 -0.000002817 -0.000001554 0.000000430 0.000003763 -0.000006045 0.000003937 -0.000002059 -0.000004856 -0.000003362 -0.000001454 -0.000027909 0.000029644 0.000010011 0.000039668 -0.000045899 -0.000053065 0.000019164 -0.000038152 0.000086809 -0.000005066 0.000029753 -0.000009109 -0.000032554 -0.000020884 0.000004317 0.000003181 0.000003722 0.000002284 -0.000006982 -0.000002253 -0.000002225 0.000000136 -0.000000502 0.000005329 0.000004785 0.000004670 0.000002810 0.000001053 -0.000007624 0.000004781 0.000003463 0.000002986 0.000001553 -0.000008319 0.000000870 0.000000066 -0.000000632 0.000000512 -0.000000485 -0.000000130 0.000000795 0.000000442 -0.000000280 0.000000324 0.000014121 -0.000000848 0.000003736 0.000005249 -0.000005914 -0.000002889 -0.000005325 -0.000003662 -0.000000527 0.000005031 -0.000007433 0.000000687 -0.000000907 -0.000006239 -0.000002104 -0.000006362 -0.000000157 -0.000002638 -0.000001072 0.000005473 -0.000009688 0.000000977 -0.000002336 -0.000004531 0.000003607 -0.000003517 0.000001497 0.000000824 -0.000003610 -0.000002711 0.000014693 0.000000908 0.000002883 0.000004204 -0.000006337 0.000015249 -0.000000308 0.000004641 0.000008073 -0.000005497 0.000003614 -0.000000793 0.000000519 0.000002779 0.000000194 -0.000006251 -0.000001831 -0.000001750 -0.000002835 0.000002975 0.000000689 -0.000000268 -0.000000044 0.000000713 0.000000956 0.000000744 0.000001168 0.000000910 -0.000000222 -0.000001392 0.000000749 0.000001132 0.000001033 -0.000000484 -0.000002628 0.000008600 0.000000268 0.000001088 0.000004627 -0.000001577 0.000000739 0.000001363 0.000000889 -0.000000234 -0.000001829 -0.000003529 -0.000000818 -0.000002154 -0.000000204 0.000005481 0.000000321 0.000003414 0.000002356 -0.000001445 -0.000005151 0.000000558 -0.000003740 -0.000002905 0.000002599 0.000006176 0.000003974 -0.000002091 -0.000000768 0.000006505 0.000004282 -0.000007399 0.000000439 -0.000000427 -0.000006251 -0.000002823 0.000008084 -0.000003085 -0.000000687 0.000006383 0.000002986 -0.000054052 0.000002551 -0.000012587 -0.000017135 0.000016863 -0.000036857 -0.000008456 -0.000006039 -0.000015145 0.000014008 0.000032165 -0.000014939 0.000001449 0.000022570 0.000010079 -0.000002241 0.000000195 -0.000000323 -0.000001048 0.000000133 -0.000001820 0.000000420 0.000000180 -0.000001480 -0.000000506 0.000007742 -0.000002087 -0.000000504 0.000005862 0.000002277 0.000000294 -0.000000395 -0.000000153 0.000000238 0.000000367 -0.000002150 0.000000575 0.000000038 -0.000001566 -0.000000169 0.000000386 -0.000001059 -0.000001135 0.000000936 0.000002182 -0.000009703 0.000005015 -0.000016351 -0.000018730 -0.000005884 0.000026875 0.000022142 -0.000003244 0.000022479 -0.000038246 0.000004531 -0.000016190 0.000000236 0.000019591 0.000003711 0.000010424 0.000025963 -0.000023900 0.000006699 -0.000040247 0.000021451 0.000025119 -0.000011585 0.000021212 -0.000045156 0.000000967 -0.000011090 0.000000478 0.000010146 0.000005385 0.000008967 0.000001187 0.000004015 -0.000000275 -0.000006863 0.000017348 0.000006802 0.000002055 0.000008366 -0.000007532 -0.000017252 0.000009772 0.000000769 -0.000011163 -0.000007291 0.000031641 -0.000002808 0.000007697 0.000005869 -0.000011733 0.000018838 0.000001724 0.000001490 0.000009340 -0.000002315 -0.000037018 0.000010941 -0.000002096 -0.000025979 -0.000008005 -0.000000123 -0.000002184 -0.000001491 0.000001131 0.000003145 -0.000000850 0.000000156 -0.000000581 -0.000000121 0.000000524 0.000000528 -0.000000950 -0.000000231 0.000000448 0.000000404 -0.000000723 0.000004540 0.000002586 -0.000002521 -0.000006238 -0.000002022 0.000001375 -0.000000448 -0.000001313 -0.000000276 0.000001323 -0.000001691 0.000000035 0.000000986 0.000000806 0.000000853 0.000002030 0.000002353 -0.000000764 -0.000004066 0.000000878 -0.000000512 -0.000000277 0.000000491 0.000000188 0.000000481 0.000001594 0.000001465 -0.000000399 -0.000002565 0.000000011 -0.000001068 -0.000000766 0.000000502 0.000001637 0.000000197 -0.000000498 -0.000000761 0.000000499 0.000001080 0.000000922 0.000000509 0.000001342 -0.000000000 -0.000002090 0.000000442 -0.000000451 0.000000044 0.000000278 0.000000079 -0.000000599 0.000000387 0.000000286 -0.000000452 -0.000000245 -0.000000188 -0.000000850 -0.000000633 0.000000221 0.000001275 0.000000263 -0.000001102 -0.000000854 0.000000576 0.000001578 -0.000000435 -0.000000272 -0.000000214 -0.000000132 0.000000552 -0.000000158 0.000000262 0.000000221 -0.000000193 -0.000000291 -0.000000042 -0.000002638 -0.000001901 0.000001267 0.000003976 0.000001440 -0.000000359 0.000000275 0.000000752 -0.000000351 -0.000000799 0.000000606 -0.000000547 -0.000000165 0.000000564 -0.000000957 -0.000000083 -0.000000888 -0.000000118 0.000001280 0.000000236 -0.000000076 -0.000000329 0.000000344 0.000000344 0.000000571 0.000000019 0.000000076 0.000000233 -0.000000102 -0.000000307 0.000000753 0.000000434 -0.000000434 -0.000000977 -0.000000967 0.000000337 0.000000044 -0.000000661 -0.000000131 0.000000262 -0.000000819 -0.000000051 0.000000252 0.000000473 -0.000000022 -0.000000222 -0.000000332 0.000000141 0.000000547 -0.000000463 -0.000000457 -0.000000469 -0.000000075 0.000000905 -0.000000355 0.000000726 0.000000705 -0.000000456 -0.000001126 0.000003199 -0.000000489 0.000001306 0.000001529 -0.000001508 -0.000001244 0.000001813 0.000002171 -0.000002671 -0.000003847 0.000001044 -0.000000308 0.000000815 0.000000130 -0.000000990 -0.000001662 0.000000638 0.000000874 -0.000001907 -0.000002093 0.000002320 -0.000000224 0.000000039 0.000001362 -0.000000146 0.000002213 -0.000000182 0.000000673 0.000000778 -0.000001194 -0.000002523 0.000000706 -0.000000259 -0.000001578 0.000000239 0.000001246 -0.000000979 -0.000001066 0.000001706 0.000002137 0.000000084 0.000001988 0.000001056 -0.000000654 -0.000003071 -0.000000313 -0.000000020 -0.000000273 0.000000196 0.000001284 0.000003486 -0.000000121 0.000000599 0.000002013 -0.000000759 0.000001919 0.000000986 0.000000751 0.000000757 -0.000001670 0.000001929 0.000000776 0.000001063 0.000000523 -0.000002547 -0.000000289 0.000000368 0.000000656 -0.000000601 -0.000000766 -0.000000663 -0.000000683 -0.000000313 -0.000000028 0.000001284 0.000001576 -0.000000244 -0.000000054 0.000000997 -0.000000212 0.000001053 -0.000000427 0.000000096 0.000000770 -0.000000122 -0.000000745 -0.000000692 -0.000000578 0.000000004 0.000001503 0.000001439 -0.000002131 -0.000001490 0.000002219 0.000003757 -0.000002238 0.000001626 0.000000694 -0.000001785 -0.000001630 0.000003049 -0.000000626 -0.000000429 0.000002384 0.000001453 0.000000801 -0.000001172 -0.000000170 0.000000581 0.000000588 0.000002925 -0.000000043 0.000000861 0.000001691 -0.000001434 0.000002457 -0.000000172 0.000000222 0.000001266 -0.000000434 0.000000052 0.000000778 0.000000701 -0.000000549 -0.000001647 -0.000000595 0.000000447 0.000000204 -0.000000452 -0.000000352 -0.000001622 -0.000000302 0.000000168 -0.000001117 -0.000000601 0.000000881 0.000000401 0.000000171 0.000000432 -0.000000294 0.000001189 -0.000000950 -0.000000853 0.000001423 0.000001887 -0.000001218 -0.000000151 -0.000000076 -0.000000573 0.000000423 0.000122701 -0.000005612 0.000047070 0.000106749 0.000009392 0.000262044 0.000039021 0.000084580 0.000197581 -0.000056711 0.000122728 0.000040199 0.000019293 0.000059093 0.000022503 0.000043714 -0.000008620 -0.000000202 -0.000030050 -0.000018286 0.000004567 -0.000003553 -0.000008062 -0.000010706 0.000009214 -0.000032329 0.000016414 0.000003518 -0.000005247 -0.000034884 0.000078316 -0.000009876 -0.000022356 0.000009430 0.000022707 0.000029765 -0.000035946 -0.000004744 -0.000039213 0.000019393 -0.000051708 0.000025366 0.000003698 0.000018522 0.000006690 -0.000062197 0.000010752 -0.000011859 -0.000061388 -0.000022569 0.000082765 -0.000001132 -0.000008703 0.000012853 -0.000001537 0.000048377 -0.000010314 0.000026250 -0.000035728 -0.000031169 -0.000049009 0.000046203 -0.000103512 -0.000249689 -0.000035730 0.000059106 -0.000026035 -0.000155040 -0.000289345 0.000013359 0.000138351 -0.000040068 -0.000107834 -0.000159195 -0.000015400 0.000027087 -0.000012362 -0.000007026 0.000010071 0.000023509 0.000085775 -0.000013372 0.000009993 0.000040726 0.000009842 -0.000079077 -0.000010842 -0.000000481 -0.000020931 0.000000814 0.000034702 0.000006944 0.000014438 0.000011066 -0.000014675 -0.000064496 -0.000003613 -0.000011028 -0.000019919 0.000006390 -0.000039642 -0.000018000 0.000005381 0.000027264 0.000004876 0.000021108 0.000018652 0.000043654 0.000074178 -0.000006724 0.000016072 0.000003484 0.000019973 0.000037164 -0.000000414 0.000009124 -0.000011274 -0.000044198 -0.000088739 -0.000008640 0.331649176 -0.033484741 0.064236497 0.000000871 -0.000001497 0.268828151 -0.000005637 -0.000000266 0.143804430 0.629481991 -0.000004988 -0.000003323 -0.106844593 0.038425828 0.651918639 0.000007123 -0.000000277 -0.095302427 -0.061315155 0.020361944 0.000010147 -0.000004345 -0.085203804 -0.311979046 -0.000429811 -0.000005320 -0.000001593 -0.002058262 -0.060461409 -0.129073164 -0.000003894 -0.000001380 -0.004224094 -0.036335377 -0.005047374 -0.000002394 -0.000007735 -0.016809335 -0.019231552 0.025147568 0.000011324 -0.000002560 0.011503152 0.069445543 0.045842293 -0.000000868 -0.000001338 -0.007270589 -0.003823444 -0.008828092 0.000001814 -0.000007608 -0.004436393 -0.052726334 -0.035573721 -0.000014728 0.000008775 -0.004703101 -0.033797765 -0.022819346 0.000000058 0.000000411 0.005683677 0.028043740 0.031928778 0.000000562 0.000009726 0.009614426 0.065939325 0.030752222 -0.000005590 0.000004382 0.013143595 -0.017233559 -0.049922289 -0.000005311 -0.000001887 -0.082123766 -0.023213546 0.022566818 0.000002515 0.000000689 0.002243050 -0.168560877 -0.123617995 0.000001077 0.000006838 0.042229994 -0.061150048 -0.282542218 -0.000004974 -0.000004616 0.004667630 -0.006815677 -0.008589473 -0.000001688 -0.000001206 0.003164773 -0.007873318 -0.025391346 -0.000003167 -0.000002816 -0.000114308 0.001612022 0.003814376 -0.000007322 -0.000000820 0.004963901 -0.003529271 0.003784296 0.000000007 0.000000211 -0.003085210 0.001695020 0.000666041 -0.000002513 -0.000007723 0.004045780 0.001097394 -0.002562219 -0.000057298 0.000057165 -0.000804052 -0.000398542 0.001455469 -0.000132651 0.000038584 0.000372174 -0.003940901 -0.000481646 -0.000017466 -0.000038281 -0.001438170 -0.001112226 -0.004214881 0.000003613 0.000001279 0.004742144 -0.003015512 0.004214100 -0.000005565 0.000003221 -0.003664084 -0.000456839 0.001700335 0.000003596 -0.000000013 0.004025425 0.001891123 -0.000313978 0.000005772 -0.000000217 0.005172161 0.005331871 0.002641105 0.000002149 -0.000000508 -0.005441233 -0.009623729 0.001117369 -0.000001318 0.000000967 -0.008216420 -0.024784785 0.001612031 0.000010809 0.000004609 -0.000041874 -0.000060369 0.000064085 -0.000005106 -0.000003992 -0.000034348 -0.000052221 0.000063629 -0.000008019 -0.000006055 -0.000004248 -0.000010791 0.000015635 -0.000003147 0.000000486 0.000001977 0.000006346 -0.000007320 -0.000007099 -0.000002831 0.000016425 0.000036894 -0.000041786 -0.000004339 -0.000002795 0.000014203 0.000019679 -0.000022036 0.000013281 0.000006128 -0.000046573 -0.000075980 0.000077869 0.000012759 0.000005726 -0.000043664 -0.000071543 0.000079048 0.000003158 0.000002125 -0.000011296 -0.000016305 0.000018110 -0.000006988 -0.000003660 0.000019387 0.000033829 -0.000031202 0.000001345 0.000001239 0.000004841 0.000015310 -0.000018257 0.000001192 0.000000565 0.000000682 -0.000000255 -0.000000611 0.000000559 -0.000001023 -0.000018278 -0.000022535 0.000023036 0.000009203 0.000005090 -0.000036632 -0.000054843 0.000053778 0.000001245 0.000000447 -0.000012205 -0.000019368 0.000021957 -0.000001517 0.000000988 0.000011099 0.000018269 -0.000018507 0.000001395 0.000000753 0.000007911 0.000006502 -0.000010854 0.000000239 0.000000556 -0.000015006 -0.000015414 0.000018607 0.000004053 0.000003372 -0.000005519 -0.000007014 0.000008599 -0.000008640 -0.000006609 0.000000110 0.000002335 -0.000000347 0.000005635 0.000002768 -0.000005928 -0.000008022 0.000009454 -0.000046324 -0.000020188 0.000082079 0.000159241 -0.000180796 -0.000040730 -0.000024490 0.000084090 0.000172273 -0.000163588 0.000025543 0.000014971 -0.000011486 -0.000010963 0.000020091 -0.000002192 -0.000001591 -0.000001121 0.000001444 -0.000002526 -0.000001993 -0.000001301 0.000000177 0.000002003 -0.000001485 0.000007594 0.000005533 -0.000007316 -0.000012044 0.000009229 0.000000144 0.000000011 0.000002300 0.000003351 -0.000003817 -0.000001974 -0.000000973 0.000015372 0.000022470 -0.000024099 0.000000869 0.000000776 0.000002180 0.000011342 -0.000014536 0.000006117 -0.000031922 0.000125819 0.000785888 0.000141957 0.000056553 -0.000009324 -0.000177662 0.000571451 0.001282842 0.000027696 0.000013911 -0.000003105 -0.001594467 0.000491157 0.000067918 -0.000040321 -0.000085910 -0.000592526 -0.001049299 0.000074883 -0.000021831 -0.000009306 0.000149138 -0.001646977 0.000012865 0.000009614 0.000511735 0.001131915 0.000631380 0.000006894 0.000000482 -0.000016964 -0.000034278 0.000044074 0.000021666 0.000014037 -0.000044159 -0.000093638 0.000081911 -0.000013407 -0.000008586 -0.000000208 -0.000005634 0.000001919 0.000025610 0.000009805 -0.000045702 -0.000087512 0.000104143 0.000020198 0.000012037 -0.000028986 -0.000060603 0.000057078 -0.000032089 -0.000019837 0.000027283 0.000046317 -0.000051876 0.000000876 0.000000416 -0.003926719 -0.001965121 -0.003177731 0.000000057 -0.000000549 -0.001611258 0.007197985 0.001982022 0.000000351 0.000000180 -0.001686964 0.003171623 0.004063801 -0.000001051 -0.000001577 -0.000804072 -0.000725145 -0.001038494 -0.000000700 -0.000001170 -0.000235453 -0.000614280 -0.000534822 0.000000209 0.000000837 0.000310703 -0.000213853 -0.000388091 -0.000000671 0.000000029 0.000196212 0.000002365 0.000841004 0.000001082 0.000000140 -0.000450299 0.000323230 0.000028513 -0.000000166 0.000000003 0.000818195 0.000085712 0.000471733 0.000000295 0.000000250 -0.000336558 0.000026831 -0.000011056 0.000000863 0.000000010 0.000009854 -0.000586213 -0.000527521 0.000000034 0.000000298 0.000109124 -0.000156615 0.000431743 0.000000324 0.000000216 -0.000004128 -0.000005660 -0.000026295 -0.000000886 -0.000000085 -0.000030699 0.000109702 0.000102481 -0.000000065 0.000000084 -0.000013099 0.000103271 -0.000030284 0.000000478 0.000000231 -0.000009557 0.000046135 -0.000078241 -0.000000462 -0.000000031 -0.000039303 -0.000026945 -0.000080960 -0.000000387 -0.000000016 0.000085127 -0.000024968 0.000074299 0.000000574 0.000000578 0.000449842 0.000536955 0.000010461 0.000001092 0.000000594 0.000237327 -0.000158343 -0.000105129 0.000000318 -0.000000349 -0.000016299 -0.000375724 -0.000344011 -0.000000004 -0.000000409 -0.000183715 -0.000269669 -0.000421407 0.000000820 -0.000000025 0.000066291 0.000184348 -0.000022762 0.000000275 0.000000313 -0.000209637 -0.000169929 -0.000002862 -0.000000218 -0.000000269 -0.000008401 -0.000002119 -0.000000107 -0.000000969 -0.000000440 -0.000023560 0.000035371 -0.000025325 -0.000000246 0.000000256 0.000001005 -0.000042083 0.000119102 0.000000156 0.000000020 0.000019484 0.000012918 -0.000026108 -0.000000424 -0.000000068 -0.000003023 0.000041232 -0.000018984 -0.000000571 -0.000000165 -0.000009675 -0.000015597 0.000049183 0.000002047 0.000001679 -0.000268778 -0.000145267 0.000075803 -0.000003558 -0.000000955 -0.000153418 -0.000101645 0.000119246 -0.000000045 0.000000589 -0.000243458 -0.000086374 0.000030322 -0.000002182 -0.000001431 -0.000066703 -0.000029371 0.000003057 0.000002586 0.000001347 0.000035749 -0.000003451 0.000033456 0.000001810 0.000000672 0.000014019 -0.000013811 0.000055482 -0.000002194 -0.000001144 0.000036476 0.000024030 -0.000069450 0.000002108 0.000000968 0.000048619 0.000053501 -0.000074255 0.000000796 -0.000000743 0.000020029 0.000026425 -0.000112485 -0.000000472 0.000000648 0.000018114 -0.000009851 0.000031319 0.000003210 0.000001610 -0.000021049 -0.000032008 0.000053867 0.000002164 0.000000625 0.000024085 0.000011108 -0.000012417 0.000001891 0.000000247 -0.000007184 0.000002692 -0.000007268 -0.000001198 0.000000062 -0.000037566 -0.000083411 0.000103547 -0.000001043 0.000000150 -0.000026356 -0.000044555 0.000070154 0.000001936 0.000000266 0.000006328 0.000012332 -0.000017807 0.000001163 0.000000349 0.000010234 0.000005880 -0.000003575 -0.000000883 0.000000046 -0.000000550 -0.000004387 0.000005082 0.000001372 0.000001497 -0.000021576 -0.000008726 0.000011008 -0.000002072 -0.000001177 0.000031278 0.000028309 -0.000047293 0.000003290 0.000001970 -0.000011455 -0.000009670 0.000003504 0.000000269 0.000000291 -0.000027295 -0.000027298 0.000039528 0.000003275 0.000001287 -0.000006597 -0.000004503 0.000005499 0.000002563 0.000000851 -0.000019656 -0.000008669 0.000021087 -0.000000019 -0.000000300 -0.000009403 -0.000009039 0.000010656 -0.000000472 -0.000000095 0.000013075 0.000008162 -0.000006626 -0.000002142 -0.000001134 -0.000007762 -0.000015279 0.000018659 0.000000975 0.000000419 -0.000002301 -0.000004379 0.000005065 0.000001581 0.000000760 0.000011343 0.000015779 -0.000019990 -0.000001557 -0.000000201 -0.000006025 -0.000009393 0.000017371 0.000115254 0.000145542 -0.000006264 -0.000012608 0.000010215 -0.000013972 -0.000068231 -0.000006262 -0.000011410 0.000025617 0.000082911 0.000016695 0.000003365 0.000012367 -0.000017408 0.000021881 0.000033285 0.000000237 0.000001917 -0.000003855 0.000016346 0.000035004 0.000004805 0.000011339 -0.000012554 -0.000057716 -0.000079425 -0.000000477 -0.000002880 0.000000531 0.000095953 0.000107954 0.000001202 -0.000004588 0.000008264 0.000080376 0.000109837 0.000000963 0.000002256 0.000000031 0.000037373 0.000049319 -0.000000705 0.000000348 -0.000000123 -0.000037623 -0.000039667 0.000007673 0.000016267 -0.000019704 0.000030109 0.000000533 -0.000002791 -0.000004280 0.000004247 0.000004885 0.000007621 0.000001021 0.000002254 -0.000001831 -0.000166162 -0.000318738 -0.000001550 -0.000010171 -0.000001074 0.000103719 0.000123345 0.000004929 -0.000010057 0.000018913 -0.000013181 -0.000042353 0.000004068 0.000013293 -0.000019952 0.000023336 0.000057041 -0.000000254 0.000009121 0.000000815 0.000045115 0.000033490 -0.000011788 -0.000023553 0.000023442 -0.000098859 -0.000090576 -0.000004777 0.000005367 -0.000002074 0.000011022 0.000020954 -0.000007592 0.000016485 -0.000033073 -0.000040191 -0.000009317 -0.000002382 0.000020659 -0.000011749 0.000006249 0.000048777 -0.000005632 -0.000034073 0.000046526 0.000034180 0.000017031 0.000003932 -0.000001661 -0.000010934 0.000014930 0.000016769 0.000008602 0.000013729 -0.000015726 -0.000021124 -0.000021420 -0.000003516 -0.000004660 0.000002848 0.260073268 0.157924399 0.638603020 -0.165426534 0.078118741 0.716327177 -0.133786723 -0.063057513 0.119383960 0.299328811 -0.085130928 -0.174534051 0.106159801 0.201530004 0.696849195 0.087357680 0.042132696 -0.264112098 -0.170908577 0.072396956 0.004242493 0.007896419 0.017394339 -0.082648038 0.007840411 0.029361067 0.059229122 -0.015288128 -0.014880866 -0.188514820 0.035548709 0.035510177 -0.048533544 0.026354110 -0.143807233 -0.021006615 -0.025254051 0.011608979 0.021421248 -0.001371841 -0.028214863 -0.051020137 0.024659027 0.014389680 -0.022416638 0.010814292 0.020584369 -0.010842683 -0.015312988 -0.026521047 0.024120141 0.018583767 -0.018020638 -0.014997918 0.003146486 -0.001773306 -0.021606502 -0.032037572 0.000765088 -0.001928781 -0.036144377 -0.072496221 0.023549521 0.021550802 -0.003179076 -0.045356147 0.008228784 0.030499496 0.002184221 0.006771259 0.008424466 -0.121608851 -0.119937577 -0.002394648 0.011520794 0.036179789 -0.122763357 -0.285536778 0.000958041 -0.010829387 0.001647078 -0.012557510 -0.003728440 -0.083708650 -0.103910304 -0.003681854 -0.005832362 -0.002763737 -0.102388017 -0.308984236 0.008947405 0.022516027 0.007455463 -0.007540489 -0.036780267 0.008595779 0.001952562 -0.000787206 -0.008879128 0.004231290 -0.000238760 0.002134708 -0.009344195 0.006906028 0.017981788 0.002069418 -0.009497638 -0.001216914 0.021349074 0.014246330 -0.001584208 -0.000916599 0.000324925 0.003128357 -0.004279794 0.000053006 -0.000202672 0.000501975 -0.004174045 -0.003685893 -0.000324339 0.000585687 0.000334736 0.001419072 -0.000641466 0.004775039 -0.002305768 0.002457423 -0.000175383 0.000514613 -0.000947197 0.001402157 -0.003191098 0.000411519 0.000508866 0.002301080 -0.003011837 -0.004227742 0.000348237 0.000257901 0.000025457 0.000039710 -0.000038075 -0.000008754 0.000003296 0.000016073 0.000034052 -0.000022156 -0.000003718 0.000001709 0.000001096 0.000005211 -0.000001133 -0.000003196 -0.000001265 -0.000002146 -0.000004790 0.000004411 0.000002260 -0.000001128 -0.000011222 -0.000031879 0.000014450 0.000007993 0.000004185 -0.000007607 -0.000014538 0.000008770 0.000003391 0.000001394 0.000027740 0.000048424 -0.000048668 -0.000015175 -0.000005549 0.000023316 0.000051586 -0.000039204 -0.000013126 0.000000168 0.000006162 0.000011419 -0.000008398 -0.000001780 0.000000619 -0.000008553 -0.000021943 0.000025375 0.000009299 0.000005183 0.000000985 -0.000016168 0.000004341 0.000005963 0.000004411 -0.000000001 0.000001362 0.000002153 -0.000001260 -0.000000656 0.000007568 0.000003940 -0.000024793 -0.000003120 0.000006142 0.000024116 0.000030728 -0.000039216 -0.000009667 -0.000003008 0.000002865 0.000013898 -0.000011980 -0.000005104 -0.000001538 -0.000006084 -0.000010998 0.000011811 0.000003613 0.000000046 -0.000004405 -0.000003983 0.000001398 -0.000002748 -0.000004086 0.000009220 0.000007309 -0.000008662 0.000001196 0.000003783 0.000004391 0.000004477 -0.000002541 0.000000653 0.000001187 -0.000002390 -0.000003084 0.000001652 0.000001015 0.000001603 0.000005716 0.000005615 -0.000002926 0.000000796 0.000001629 -0.000050162 -0.000135795 0.000068706 0.000032252 0.000011089 -0.000051329 -0.000133402 0.000103568 0.000051166 0.000040580 0.000021217 0.000009526 0.000007134 0.000012075 0.000010073 -0.000000465 -0.000005332 -0.000004216 0.000000583 0.000002082 -0.000000770 -0.000003019 0.000000633 0.000001159 0.000002000 0.000010502 0.000004868 -0.000010390 -0.000001240 -0.000003232 -0.000003760 -0.000000377 0.000001368 -0.000000110 -0.000000004 -0.000009551 -0.000009037 0.000018841 0.000003089 -0.000000954 0.000007509 -0.000018699 -0.000004009 0.000006380 0.000005305 -0.001474784 0.000207115 0.001926618 -0.000531257 -0.006038753 0.000317510 0.000853249 0.001137717 -0.002115236 -0.000398003 0.000632082 0.001993310 -0.002953225 0.003813638 0.005557223 -0.000740167 -0.000437787 -0.000249195 -0.000271373 -0.002888216 -0.000445391 -0.000701706 0.001778273 0.001905677 -0.003078740 -0.000594879 0.000769524 0.001775691 0.004030893 0.000859966 0.000006664 0.000033235 -0.000010476 -0.000007276 0.000000762 0.000028185 0.000070687 -0.000062632 -0.000031612 -0.000029131 -0.000009965 0.000004130 -0.000010092 -0.000009889 -0.000006203 0.000027879 0.000076666 -0.000033322 -0.000015674 -0.000002929 0.000020820 0.000048050 -0.000035356 -0.000017092 -0.000014517 -0.000027955 -0.000037088 0.000016055 0.000001414 0.000000121 -0.000309952 -0.000717401 0.001209550 0.000243891 -0.000314499 0.000620729 0.000191705 -0.001039823 0.000046396 0.000417141 0.000455082 0.000244828 -0.000663750 0.000298555 0.000196558 0.000292375 0.000006337 0.000333477 -0.000247162 -0.000063571 0.000068505 -0.000009632 0.000364368 -0.000078374 -0.000073882 -0.000232955 -0.000196672 -0.000047475 0.000042046 -0.000005462 0.000020213 0.000195479 -0.000253114 0.000064496 0.000026351 -0.000053824 0.000018230 0.000022282 0.000059775 -0.000005903 0.000129076 0.000185946 -0.000356702 -0.000120657 0.000098560 -0.000001027 -0.000021726 -0.000025853 0.000087129 0.000007283 -0.000019474 -0.000062125 0.000174336 -0.000038044 -0.000040884 -0.000072931 0.000080364 -0.000141889 0.000077028 -0.000001144 0.000001472 -0.000009288 0.000002772 0.000002400 0.000003350 0.000023899 0.000012561 -0.000036597 -0.000000471 0.000005400 -0.000005571 -0.000014598 0.000029502 0.000004795 -0.000005450 -0.000016352 -0.000021098 0.000042429 0.000002845 -0.000006400 -0.000011173 -0.000027192 0.000050686 0.000007038 -0.000012489 0.000008295 0.000014100 -0.000032784 -0.000005012 0.000005581 -0.000176960 -0.000080085 -0.000024201 0.000051560 0.000016286 -0.000152856 -0.000009324 -0.000074902 0.000043409 -0.000008596 0.000054083 -0.000038803 0.000210183 -0.000067932 -0.000039476 0.000114816 -0.000049044 0.000221628 -0.000086845 -0.000028690 -0.000023980 -0.000018941 0.000084049 -0.000017399 -0.000011576 0.000091058 0.000030333 -0.000130023 0.000005184 0.000031219 -0.000003637 0.000002000 -0.000000423 -0.000001521 -0.000001095 -0.000003590 -0.000001041 0.000025086 -0.000002200 -0.000007232 0.000032607 0.000022485 -0.000059677 0.000001761 0.000012025 -0.000005346 -0.000008419 0.000013716 0.000000490 -0.000001123 0.000000647 -0.000011344 0.000015994 0.000002172 0.000000941 0.000014475 0.000012719 -0.000021168 -0.000003910 0.000004504 0.000049098 0.000030196 -0.000099485 0.000002476 0.000012815 0.000027145 0.000079514 -0.000056757 -0.000031164 -0.000018573 0.000057604 0.000039056 -0.000086051 0.000001076 0.000006247 0.000019567 0.000027749 -0.000017212 -0.000010308 -0.000002258 0.000023906 0.000005290 -0.000018706 -0.000002905 0.000007560 0.000007321 0.000014083 -0.000007554 -0.000005421 0.000001363 -0.000033344 -0.000023583 0.000044246 -0.000002270 -0.000015540 -0.000016607 -0.000040873 0.000032265 0.000011945 0.000005438 -0.000036868 -0.000025479 0.000063658 -0.000004674 -0.000012896 0.000002349 0.000000498 -0.000009858 0.000004281 0.000002276 0.000019898 0.000018868 -0.000030946 -0.000002335 0.000003972 -0.000006782 -0.000009025 0.000007863 0.000002304 0.000002292 0.000000684 -0.000000855 0.000002928 -0.000000830 0.000002971 0.000024651 0.000029557 -0.000051545 -0.000003913 0.000005115 0.000019814 0.000019442 -0.000034694 -0.000000127 0.000000256 -0.000002478 -0.000005282 0.000007169 0.000000801 0.000000520 0.000003147 -0.000001454 -0.000002083 0.000002785 0.000005199 0.000000398 -0.000001641 -0.000001536 0.000000921 -0.000000936 0.000009916 -0.000000989 -0.000013513 0.000006057 0.000006394 -0.000025494 -0.000016361 0.000032914 -0.000000385 -0.000008323 0.000006450 -0.000001588 -0.000011107 0.000002726 0.000004583 0.000015758 0.000016879 -0.000021954 -0.000002774 0.000002314 0.000014204 0.000000140 -0.000017657 0.000003878 0.000009816 0.000010216 0.000011509 -0.000014694 -0.000002620 0.000000524 0.000002264 0.000007202 -0.000006835 -0.000001915 0.000000168 -0.000002625 -0.000003761 0.000004954 0.000000640 0.000000119 0.000004543 0.000007417 -0.000007123 -0.000000902 0.000001412 0.000001506 0.000002079 -0.000003984 -0.000000581 0.000000641 -0.000003872 -0.000009563 0.000009104 0.000002421 -0.000000279 0.000004233 0.000004527 -0.000006974 0.000000135 0.000000907 0.000007173 0.000008794 -0.000003881 -0.000002090 -0.000005006 0.000003975 0.000013513 0.000006577 0.000005522 0.000013736 -0.000000456 -0.000010834 -0.000000037 0.000002608 0.000003341 0.000000519 -0.000003494 -0.000001857 0.000000351 -0.000001306 -0.000006507 -0.000011249 0.000003513 0.000001219 0.000000304 0.000001002 0.000002960 -0.000002746 -0.000002423 -0.000002915 0.000001733 0.000009275 -0.000001530 -0.000001160 0.000003551 -0.000003052 -0.000002808 0.000001273 0.000000320 0.000000528 0.000001716 -0.000001219 0.000000659 0.000001745 0.000001377 -0.000008847 -0.000015204 0.000002592 -0.000000157 -0.000002828 0.000003742 0.000002981 -0.000002098 0.000000423 0.000000482 -0.000003044 -0.000002980 -0.000000241 -0.000000955 -0.000002152 0.000002815 0.000005741 -0.000001182 -0.000004977 -0.000007888 -0.000000049 0.000022508 -0.000002290 -0.000003902 0.000003933 -0.000000024 -0.000011614 -0.000002254 0.000003042 0.000002316 -0.000002842 -0.000007718 0.000007683 0.000007772 0.000008691 0.000011537 0.000017518 -0.000009179 -0.000002945 -0.000001367 -0.000003968 -0.000013196 0.000004363 0.000004911 -0.000001857 0.000003558 -0.000029877 -0.000006443 0.000014378 0.000010591 -0.000005747 -0.000024401 0.000012215 0.000014442 0.000021031 -0.000000912 0.000032457 0.000018169 -0.000001084 0.000000752 0.000005751 0.000001979 -0.000013870 -0.000008426 -0.000014354 -0.000007337 -0.000010366 0.000005928 0.000001056 0.000002429 0.000002409 0.000001585 -0.000004612 -0.000001426 -0.000003790 0.637205502 0.051549406 0.284493119 -0.088037855 0.157171115 0.666313838 -0.266379479 -0.135974346 0.166327210 0.580305185 -0.031828026 -0.104242413 -0.073376566 0.012851190 0.291599320 -0.074089140 -0.097368994 -0.309968210 -0.028359381 0.170919637 0.019191240 -0.008624938 -0.084709172 -0.121902254 -0.182938347 0.024768295 -0.006382822 -0.038438440 -0.005221331 -0.133677180 0.002575828 -0.020366891 -0.019520673 0.019772118 -0.084033143 -0.065162145 0.016772874 0.073044201 0.036707124 0.094436721 0.014419735 0.004295304 -0.004612886 0.003350208 -0.000433493 0.015576745 -0.003842180 0.000164187 0.001289526 -0.000415004 -0.013147697 0.002840281 0.001713633 -0.000453760 -0.000119854 -0.006271179 0.006249690 0.002831158 -0.000086312 0.004009608 -0.037857021 -0.004983073 -0.008180400 0.000066300 -0.000879380 -0.059022604 -0.009804310 -0.024154030 0.002508822 0.003193705 0.017984906 -0.104782967 -0.020342751 0.025666747 -0.015560656 0.008532549 -0.015888745 -0.110919893 0.000543539 -0.018492398 -0.033668255 0.020110711 0.000226474 -0.119861407 0.005556902 0.000493244 0.007074095 -0.002708109 -0.008115003 -0.052102804 0.000664798 0.005382649 -0.007700307 -0.025234124 0.017374034 0.001754662 0.000918136 -0.000421002 0.000750914 0.045784544 -0.000859053 0.004821669 -0.001857536 0.004730947 -0.001064481 0.000297676 -0.002787160 0.001433431 0.001414006 -0.002707014 -0.001491822 0.004016675 0.000613566 -0.002070615 0.007591800 0.000038523 0.000034201 0.000031760 -0.000067262 -0.000005119 0.000031471 0.000031549 0.000028018 -0.000053702 -0.000000365 0.000004329 0.000008186 0.000007345 -0.000009878 -0.000001671 -0.000005193 -0.000004206 -0.000005904 0.000010139 0.000001288 -0.000024317 -0.000024573 -0.000024424 0.000045969 0.000002975 -0.000012049 -0.000011498 -0.000011504 0.000021863 0.000000762 0.000050633 0.000041562 0.000035767 -0.000082436 -0.000005903 0.000044910 0.000042723 0.000042092 -0.000081863 -0.000006661 0.000009426 0.000008820 0.000010259 -0.000017338 -0.000001460 -0.000022598 -0.000018227 -0.000014260 0.000035749 0.000003173 -0.000008299 -0.000011809 -0.000010559 0.000018150 0.000001596 0.000000292 0.000001528 0.000001145 -0.000001979 -0.000000788 0.000016063 0.000009087 0.000006507 -0.000018572 -0.000002363 0.000036539 0.000027857 0.000022375 -0.000056436 -0.000003518 0.000013556 0.000011993 0.000010641 -0.000021097 -0.000002300 -0.000011850 -0.000010340 -0.000009660 0.000020559 0.000002169 -0.000004027 -0.000004001 -0.000003566 0.000006746 -0.000001620 0.000010158 0.000007766 0.000005615 -0.000013842 0.000001715 0.000004984 0.000003823 0.000002859 -0.000007804 0.000001215 -0.000003187 -0.000000906 -0.000000469 0.000004304 -0.000000465 0.000006303 0.000004074 0.000004097 -0.000009728 0.000001412 -0.000105352 -0.000106731 -0.000104692 0.000204538 0.000012919 -0.000116496 -0.000099720 -0.000083143 0.000193323 0.000016494 0.000012856 0.000005868 0.000011342 -0.000024128 0.000008617 -0.000000586 -0.000002867 -0.000003640 0.000004879 0.000000297 -0.000001871 -0.000001304 -0.000001284 0.000002918 -0.000000239 0.000011080 0.000003557 0.000000631 -0.000011528 0.000001644 -0.000001360 -0.000001085 -0.000001132 0.000002352 0.000000605 -0.000015407 -0.000010022 -0.000007679 0.000020518 0.000000968 -0.000004166 -0.000012375 -0.000012594 0.000017240 0.000002109 0.000389626 -0.000315144 0.013774572 0.040102789 -0.000796731 0.000206253 0.003231870 0.015969046 -0.006645940 -0.006557003 0.003024409 0.034985262 -0.020987731 -0.048950873 -0.000571574 0.000180515 -0.002398793 -0.042303347 0.007079881 0.001142762 -0.008933050 -0.033909895 -0.044318526 0.012024180 -0.001753839 -0.005914209 0.015087794 0.026826062 0.013380088 0.002719899 0.000020593 0.000027267 0.000029066 -0.000048178 -0.000004988 0.000065318 0.000051769 0.000038203 -0.000101156 -0.000008664 0.000000042 0.000004978 0.000001112 -0.000000720 -0.000006660 0.000057105 0.000060986 0.000062644 -0.000116251 -0.000007181 0.000042720 0.000035039 0.000028782 -0.000070251 -0.000004503 -0.000035555 -0.000026416 -0.000026607 0.000060936 -0.000003655 -0.000119373 -0.000093041 -0.000046413 0.000184323 0.000046967 0.000150266 -0.000185763 -0.000298982 0.000209084 0.000452026 -0.000239578 -0.000053996 0.000151487 0.000296116 0.000101755 0.000229259 -0.000030160 -0.000257274 -0.000113093 0.000181171 -0.000064044 -0.000045446 -0.000096064 0.000082377 0.000062794 -0.000017815 0.000024625 0.000064855 -0.000019521 -0.000056377 -0.000008085 0.000116050 0.000202123 -0.000121218 -0.000097058 -0.000063790 -0.000049345 -0.000029180 0.000091285 0.000042005 0.000163763 0.000071208 0.000001976 -0.000204331 -0.000009438 -0.000025803 -0.000015467 0.000012212 0.000050214 -0.000022207 0.000023178 -0.000016274 -0.000058116 -0.000003307 -0.000003319 -0.000033003 0.000073168 0.000153469 -0.000059732 -0.000082361 0.000004757 0.000004022 0.000005835 -0.000009593 0.000000572 0.000007838 0.000006174 0.000008448 -0.000009119 0.000001883 -0.000015192 -0.000021022 -0.000022840 0.000035491 0.000012225 -0.000020115 -0.000021989 -0.000023084 0.000037721 0.000010639 -0.000016786 -0.000008186 -0.000003119 0.000021574 0.000000147 0.000009112 0.000016549 0.000020941 -0.000025703 -0.000011527 -0.000119394 -0.000032660 0.000035241 0.000100558 -0.000015877 -0.000015604 0.000036265 0.000078828 -0.000034160 -0.000058206 0.000007290 -0.000045592 -0.000092574 0.000043702 0.000031258 0.000038000 -0.000060037 -0.000142379 0.000041379 0.000065656 -0.000042083 -0.000035417 -0.000035754 0.000060990 0.000030764 0.000089381 0.000029742 -0.000000563 -0.000078644 -0.000016483 0.000001110 0.000000790 0.000000082 -0.000001244 0.000001373 -0.000008256 -0.000008650 -0.000010895 0.000015434 0.000005886 0.000026675 0.000026038 0.000028258 -0.000046186 -0.000012071 -0.000007196 -0.000008510 -0.000009139 0.000014294 0.000001684 -0.000013569 -0.000013069 -0.000012979 0.000023297 0.000006900 0.000012658 0.000013179 0.000013316 -0.000024071 -0.000001628 0.000064064 0.000065576 0.000069063 -0.000117852 0.000002106 0.000074497 0.000063146 0.000050868 -0.000121137 0.000003959 0.000058658 0.000053274 0.000051843 -0.000096974 0.000007037 0.000030526 0.000016489 0.000007095 -0.000039571 0.000005616 0.000017149 -0.000000819 -0.000009676 -0.000010563 -0.000004279 0.000012243 0.000011652 0.000008284 -0.000021256 -0.000002630 -0.000033469 -0.000027315 -0.000021462 0.000051458 0.000008350 -0.000034440 -0.000028356 -0.000020462 0.000052965 0.000004093 -0.000029862 -0.000029884 -0.000030677 0.000051887 0.000011286 -0.000003916 0.000002305 0.000007037 -0.000000172 -0.000006381 0.000022669 0.000017642 0.000014650 -0.000034545 -0.000006598 -0.000008869 -0.000003957 -0.000002870 0.000010436 -0.000003756 0.000003600 0.000004755 0.000002061 -0.000006948 -0.000003710 0.000031752 0.000033798 0.000033588 -0.000059419 -0.000010405 0.000017653 0.000014156 0.000016174 -0.000027256 -0.000005917 -0.000003619 -0.000006439 -0.000007392 0.000009873 0.000001631 0.000001418 -0.000001258 -0.000001892 0.000000608 -0.000000419 -0.000001961 -0.000001149 0.000000920 0.000002346 -0.000000084 0.000005389 0.000004185 0.000005765 -0.000007996 -0.000000022 -0.000026152 -0.000015641 -0.000009641 0.000033955 0.000001787 0.000004979 0.000002628 0.000002283 -0.000006378 -0.000000267 0.000019732 0.000014535 0.000011714 -0.000029489 -0.000000926 0.000011264 0.000002668 0.000000156 -0.000010353 -0.000001442 0.000014275 0.000007668 0.000003687 -0.000017593 0.000000380 0.000006676 0.000007230 0.000005933 -0.000012367 -0.000001097 -0.000004406 -0.000004230 -0.000004191 0.000007646 -0.000000286 0.000006660 0.000008070 0.000008449 -0.000013650 -0.000001505 0.000002762 0.000002788 0.000002059 -0.000004897 -0.000001134 -0.000008128 -0.000010253 -0.000009395 0.000016940 0.000002282 0.000003930 0.000005208 0.000006047 -0.000008568 -0.000001818 0.000008552 0.000005331 0.000002794 -0.000011569 0.000001523 0.000006951 0.000010845 0.000018944 -0.000024016 0.000001833 -0.000005828 -0.000009546 -0.000009204 0.000012676 0.000000504 -0.000000685 -0.000002389 -0.000003563 0.000004165 0.000000328 -0.000009542 -0.000006760 -0.000008468 0.000018255 -0.000000419 0.000002570 0.000001460 0.000000930 -0.000003332 -0.000000766 0.000006076 0.000005800 0.000011939 -0.000017491 -0.000002007 -0.000003456 0.000000222 -0.000000832 0.000004155 -0.000000808 0.000000401 -0.000001551 -0.000001114 0.000000665 0.000001563 -0.000012559 -0.000009251 -0.000012010 0.000024486 -0.000001693 0.000003877 0.000001765 0.000001517 -0.000005272 0.000000975 -0.000003217 -0.000000206 -0.000002066 0.000005076 -0.000001256 0.000006173 -0.000002388 -0.000006470 -0.000009403 0.000004223 0.000012958 0.000014401 0.000027203 -0.000038377 -0.000005320 -0.000008263 -0.000007420 -0.000008360 0.000012928 -0.000005356 -0.000007100 -0.000000761 -0.000000623 0.000011451 0.000001028 0.000016642 0.000010838 0.000011313 -0.000028425 0.000001220 -0.000009745 -0.000002373 -0.000015028 0.000027337 0.000003439 -0.000015986 -0.000018970 -0.000029299 0.000041888 -0.000000844 -0.000019935 -0.000012701 -0.000012188 0.000037398 0.000004158 0.000012496 0.000023727 0.000019411 -0.000035487 0.000004946 0.000007250 -0.000001976 -0.000002160 -0.000007926 -0.000004620 -0.000010600 -0.000008495 -0.000006021 0.000015443 -0.000001135 0.000003150 0.000002122 -0.000000592 -0.000001239 -0.000000416 0.640155301 0.098457959 0.697142297 -0.056209088 0.115592017 0.267978767 -0.175353052 0.106714662 0.193431468 0.685498123 0.039972038 -0.257667889 -0.152158810 0.052291457 0.638574593 0.000471422 -0.000605721 0.004766908 -0.002992434 0.002354562 -0.001011473 0.001045892 -0.003768981 -0.004190123 -0.000534574 0.000847513 0.000311727 0.001312355 0.000538063 0.001516547 0.000313045 0.002789849 -0.001298154 0.000292310 0.000985203 0.001122926 -0.002788154 0.000589610 0.000606238 0.000210426 -0.001833802 -0.003758233 0.000035856 0.000146853 -0.000732047 -0.017470280 0.010449718 0.007830079 -0.002888656 -0.004588238 -0.013032984 0.029412846 -0.004867491 -0.006073540 -0.005494194 0.023466921 0.003021663 0.000278088 -0.005829286 0.009040916 0.016310341 0.047853425 0.003671266 0.008145729 0.011054598 -0.122605759 -0.124357237 -0.003407718 0.011632104 0.014439050 -0.125930821 -0.274973543 0.002328132 -0.011848748 -0.012645342 -0.014098394 -0.001589363 -0.069430410 -0.089325183 -0.006485533 -0.007755794 -0.004341217 -0.090389601 -0.311231115 -0.030505715 0.023540498 0.006605571 -0.004425445 -0.030389786 -0.060883491 -0.000021269 0.000001866 0.000011091 0.000017341 -0.000038179 -0.000024304 -0.000000318 0.000015472 0.000013889 -0.000032401 -0.000006730 0.000000064 0.000004187 0.000005517 -0.000007526 0.000004139 -0.000000153 -0.000000324 -0.000002050 0.000005746 0.000017783 0.000000988 -0.000007487 -0.000012299 0.000023600 0.000008204 0.000001255 -0.000004805 -0.000005913 0.000010673 -0.000019488 0.000005093 0.000008686 0.000025678 -0.000040625 -0.000029159 0.000001109 0.000012220 0.000023061 -0.000045069 -0.000006851 -0.000000549 0.000003395 0.000004457 -0.000009669 0.000005515 -0.000003389 -0.000001640 -0.000012020 0.000016017 0.000008524 0.000000660 -0.000003223 -0.000007688 0.000008833 -0.000001123 0.000000136 -0.000000478 0.000000952 -0.000001231 -0.000001422 0.000005527 -0.000000272 0.000004466 -0.000012696 -0.000010268 0.000004136 0.000005999 0.000017757 -0.000027518 -0.000006410 0.000001377 0.000001382 0.000008462 -0.000010998 0.000006032 -0.000001484 -0.000002168 -0.000006602 0.000011489 0.000005221 0.000001630 -0.000004682 0.000001436 0.000005187 -0.000005732 -0.000000708 0.000005533 0.000001151 -0.000008164 -0.000003167 -0.000000863 0.000002907 -0.000000026 -0.000003769 -0.000000798 0.000000443 0.000000631 0.000000230 -0.000000290 -0.000004110 -0.000001686 0.000003412 -0.000000406 -0.000003956 0.000078029 0.000002762 -0.000032272 -0.000051917 0.000107897 0.000037523 -0.000009701 -0.000010614 -0.000066705 0.000081273 -0.000017480 -0.000009562 0.000016164 -0.000010718 -0.000009893 0.000003603 0.000001432 -0.000001349 -0.000000780 0.000002277 0.000000310 0.000000677 -0.000000374 -0.000000680 -0.000000004 0.000002668 0.000000827 0.000001038 0.000001917 -0.000000786 0.000000289 -0.000000451 -0.000000587 -0.000001501 0.000002236 0.000003466 -0.000001987 -0.000002883 -0.000007598 0.000010316 0.000011801 0.000002042 -0.000002875 -0.000006683 0.000009104 -0.000125480 0.002535247 -0.000411254 0.000892748 0.000909421 -0.007569973 0.002874848 0.001220018 0.002129433 -0.001046200 -0.006467008 -0.001182985 -0.000248836 0.000658387 -0.001487239 0.001775746 0.005418672 -0.002007757 -0.001153461 0.001195289 0.004376165 0.003627044 -0.000837069 -0.000812503 0.002586929 -0.002267938 -0.003508801 0.000341799 0.002300174 -0.000598671 -0.000024689 -0.000001426 0.000008719 0.000012826 -0.000030686 -0.000010023 0.000008053 0.000000811 0.000037896 -0.000037071 0.000004600 0.000006023 -0.000007789 0.000010775 -0.000003137 -0.000049752 -0.000003255 0.000021319 0.000027997 -0.000064369 -0.000013173 0.000002421 0.000004491 0.000021742 -0.000027960 0.000022269 0.000006260 -0.000015391 -0.000005156 0.000025064 0.000045803 0.000095163 0.000415699 -0.000134423 0.000049910 0.000315430 0.000106835 -0.000277608 -0.000914861 0.001226121 -0.000307294 0.000190591 -0.000587286 -0.000227710 0.000176355 0.000325599 -0.000066592 0.000094717 -0.000201476 0.000101922 0.000078597 -0.000020808 -0.000056238 -0.000128718 -0.000036978 -0.000075205 -0.000019934 0.000231109 0.000219124 0.000084215 -0.000220285 0.000035615 -0.000094025 0.000209158 -0.000310663 -0.000001746 0.000011202 -0.000047410 -0.000114675 0.000093504 0.000056498 -0.000053330 0.000061589 0.000059681 -0.000020314 -0.000036982 -0.000022865 0.000024930 0.000062631 -0.000056839 0.000084045 -0.000026606 0.000060612 -0.000015271 -0.000008289 -0.000177887 0.000033260 -0.000032948 0.000170861 -0.000207631 0.000001435 0.000013005 0.000012481 -0.000026372 0.000004151 -0.000015225 -0.000003700 0.000006468 0.000025605 0.000008768 0.000014916 -0.000006500 -0.000012701 -0.000021989 0.000040850 0.000018180 0.000000238 -0.000012769 -0.000035080 0.000037191 -0.000001907 0.000002761 -0.000000637 -0.000000680 0.000004453 -0.000017406 0.000002708 0.000003722 0.000030411 -0.000029929 -0.000056542 0.000045282 -0.000029388 -0.000050031 0.000136779 -0.000080803 0.000008910 0.000045161 0.000109266 -0.000058325 0.000114701 0.000003379 -0.000025047 -0.000132655 0.000036262 0.000170295 -0.000025637 0.000000707 -0.000158570 0.000094172 0.000032530 0.000021821 -0.000067168 -0.000109031 0.000088246 0.000010551 -0.000049859 0.000099973 0.000116674 -0.000086222 -0.000001534 -0.000001258 -0.000003398 0.000005220 0.000000179 0.000007319 -0.000002636 -0.000010259 -0.000014369 0.000020256 -0.000021812 0.000003142 0.000019764 0.000034696 -0.000043626 0.000008734 -0.000000391 -0.000004443 -0.000013056 0.000012996 0.000006341 -0.000004799 -0.000002705 -0.000008580 0.000018678 -0.000010580 0.000002139 0.000007796 0.000012150 -0.000016300 -0.000060834 0.000022052 0.000066414 0.000076339 -0.000103974 -0.000054098 0.000000239 0.000040235 0.000088742 -0.000047098 -0.000047778 0.000018441 0.000054845 0.000067148 -0.000094432 -0.000004794 -0.000002633 0.000002132 0.000014827 -0.000011473 0.000018592 0.000001031 -0.000015903 -0.000016280 0.000007406 -0.000000717 0.000002800 0.000001230 -0.000008742 -0.000003422 0.000000336 -0.000014298 0.000005043 0.000021656 0.000038862 0.000021522 0.000006325 -0.000022085 -0.000044551 0.000028640 0.000019973 -0.000003583 -0.000024610 -0.000027164 0.000049423 -0.000006564 -0.000001477 0.000009508 0.000013810 -0.000014931 -0.000007486 0.000004061 0.000005043 0.000013816 -0.000024614 0.000007143 0.000003446 -0.000011035 -0.000018073 0.000001125 0.000006863 0.000008415 -0.000016085 -0.000023400 -0.000004675 -0.000027866 0.000001448 0.000029592 0.000047312 -0.000051857 -0.000021996 -0.000008259 0.000030000 0.000052820 -0.000024512 0.000007387 -0.000000594 -0.000007780 -0.000011011 0.000010144 0.000006272 0.000001777 -0.000006252 -0.000015935 0.000000259 -0.000003807 -0.000001965 0.000006286 0.000010282 -0.000000949 -0.000002429 0.000004166 0.000006467 -0.000002386 -0.000012570 0.000002624 -0.000004288 -0.000005429 -0.000003161 0.000020712 0.000000769 0.000003313 0.000001068 -0.000002979 -0.000008539 -0.000007923 0.000001799 0.000008568 0.000010314 -0.000016393 0.000007500 0.000005192 -0.000006994 -0.000015372 -0.000006962 -0.000001300 0.000000568 0.000002333 0.000004708 -0.000005651 -0.000003887 0.000001545 0.000001141 0.000002931 -0.000008342 0.000003900 -0.000000460 -0.000003723 -0.000004876 0.000005322 -0.000006612 0.000000773 0.000004529 0.000004806 -0.000010373 -0.000000401 0.000001266 -0.000000727 0.000000242 -0.000004171 0.000007164 -0.000001958 -0.000003944 -0.000007268 0.000012739 -0.000004958 0.000000872 0.000004998 0.000006257 -0.000008442 -0.000000204 -0.000000966 0.000002079 0.000001243 -0.000000820 -0.000024340 -0.000006627 0.000012119 -0.000004087 -0.000018888 0.000007895 0.000000461 -0.000004724 -0.000003086 0.000007269 0.000004137 0.000001158 -0.000001244 -0.000000035 0.000003421 0.000007112 0.000001808 -0.000003477 -0.000001731 0.000007555 0.000001091 0.000000335 -0.000001392 0.000002392 -0.000000172 -0.000010914 -0.000001531 0.000002496 0.000002350 -0.000010940 0.000000203 0.000001677 0.000000260 0.000000190 -0.000000441 0.000000058 -0.000001028 0.000001223 -0.000002178 0.000001470 0.000011758 0.000003886 -0.000006156 0.000000353 0.000010768 -0.000001279 -0.000000807 0.000001516 -0.000000386 -0.000001250 0.000002606 0.000002517 -0.000001007 0.000001756 0.000000978 0.000008097 -0.000002402 -0.000004502 0.000001575 0.000009641 -0.000025046 -0.000003282 0.000006333 0.000007703 -0.000024698 0.000010569 0.000005052 -0.000006220 -0.000001834 0.000002497 -0.000006643 -0.000001555 0.000005616 -0.000005040 -0.000002842 -0.000007359 -0.000001700 0.000004401 0.000002622 -0.000009665 0.000009439 0.000001601 0.000002378 -0.000003371 0.000011116 0.000027861 0.000004650 -0.000007100 -0.000009473 0.000019735 -0.000000862 -0.000001831 0.000003917 -0.000014722 0.000005679 -0.000027334 -0.000012670 0.000015530 -0.000000027 -0.000013758 0.000012431 0.000006282 -0.000008163 0.000009030 0.000003641 0.000005109 0.000001069 -0.000004447 -0.000003055 0.000006383 0.000002788 0.000001339 -0.000000211 0.000002945 0.000000536 0.037796036 -0.004102728 0.124322126 -0.037808791 0.128973299 0.296384188 -0.003209450 0.001953061 -0.001261430 0.075407691 0.001765708 -0.000095195 0.000256779 0.114011429 0.322580773 -0.001684836 0.000327445 0.000620838 0.004059671 0.037908915 0.000616512 -0.000208417 0.000127722 -0.002792327 -0.000316236 0.000365371 0.000961952 -0.000673084 0.001381748 -0.003971825 0.000521838 0.000656401 -0.000510980 -0.002289741 0.000733117 -0.000569585 0.000229033 -0.000099816 0.000831463 -0.000434991 0.000282702 -0.000066301 0.000040794 0.000161802 -0.000327187 -0.000239075 0.000072257 -0.000107891 0.000242887 -0.000002694 -0.000000056 0.000218248 0.000015883 -0.000590020 0.000241507 -0.000147167 -0.000472769 0.000187547 0.000192598 -0.000155289 -0.000322671 -0.001287292 0.000348347 -0.000185839 0.000099921 -0.000008034 -0.000013868 0.000004809 -0.000006261 0.000000305 0.000002285 -0.000015324 0.000011554 -0.000005108 0.000002205 0.000010230 -0.000005038 0.000008995 0.000002148 -0.000001806 -0.000004952 0.000002713 -0.000002758 -0.000000204 0.000000936 -0.000006538 0.000013062 -0.000016840 0.000005694 0.000000614 0.000001936 0.000005225 -0.000004832 0.000003707 -0.000001189 -0.000003666 -0.000025387 0.000008218 -0.000006606 -0.000002220 0.000004710 -0.000022419 0.000016986 -0.000005060 -0.000001711 -0.000001857 -0.000003902 0.000003009 -0.000001843 0.000000806 -0.000004175 0.000014717 -0.000004239 0.000001908 0.000002677 -0.000014385 0.000011292 -0.000014612 -0.000000533 0.000002538 0.000003240 -0.000000059 0.000002729 0.000000214 -0.000000943 0.000002169 -0.000006708 -0.000010994 0.000003921 -0.000002173 -0.000009754 -0.000017198 -0.000000794 -0.000004396 -0.000000521 0.000000451 -0.000008762 0.000003370 -0.000000335 -0.000001275 -0.000001462 0.000005578 -0.000002700 0.000000577 0.000000875 0.000004507 -0.000000937 0.000001364 0.000002362 -0.000002640 -0.000008213 -0.000001346 -0.000003868 -0.000003267 0.000002937 -0.000003343 -0.000000582 -0.000000668 -0.000002815 0.000001750 0.000002404 0.000000753 0.000000510 0.000002539 -0.000000340 -0.000004393 -0.000000499 -0.000000918 -0.000004087 0.000002433 -0.000020775 0.000051139 -0.000062061 0.000026387 0.000002396 -0.000013882 0.000073549 -0.000048826 0.000019171 0.000013364 -0.000027632 0.000012510 -0.000008112 -0.000022749 0.000015806 -0.000000224 -0.000000412 -0.000005894 0.000002645 -0.000000399 0.000000658 0.000001479 -0.000001494 0.000001304 -0.000000149 -0.000012542 -0.000002547 -0.000006826 -0.000006102 0.000002307 0.000004168 -0.000000046 0.000000310 -0.000000135 0.000000086 0.000003893 0.000007132 0.000004379 0.000000565 -0.000000146 -0.000020909 0.000010413 -0.000022433 -0.000000713 0.000002805 -0.000523917 -0.000261300 0.000066645 0.000307673 0.000059686 0.000125868 -0.000156824 0.000093319 -0.000296310 0.000519791 0.000186872 0.000520007 -0.000209831 -0.000057265 -0.000050528 -0.000091050 -0.000041153 -0.000078012 -0.001208421 -0.001075352 -0.000114425 -0.000061824 -0.000003800 -0.000442699 0.001388294 0.000033082 -0.000047032 0.000118481 0.002190416 0.003527746 0.000013962 -0.000010903 0.000021857 -0.000002487 -0.000002390 0.000004345 -0.000043843 0.000022222 -0.000009846 -0.000009434 0.000019795 -0.000011518 0.000009903 0.000013131 -0.000010091 0.000012315 -0.000025655 0.000037382 -0.000015662 0.000000167 0.000000421 -0.000024414 0.000015607 -0.000010388 -0.000003255 0.000018404 0.000006119 -0.000004749 0.000022878 -0.000010069 -0.000157030 0.000093261 -0.000046071 -0.000087056 -0.000003405 -0.000021678 0.000042931 -0.000053064 0.000016704 0.000021142 -0.000080052 -0.000129327 -0.000071796 0.000039884 0.000009725 0.000148628 0.000091230 0.000079463 -0.000049801 0.000001179 0.000055112 0.000045338 0.000066482 -0.000019233 -0.000001937 -0.000032307 -0.000032702 -0.000027277 0.000004106 -0.000004380 -0.000041062 -0.000090973 0.000006033 0.000031624 -0.000001956 -0.000010549 -0.000014064 -0.000013614 0.000010200 -0.000004076 0.000033466 -0.000003095 -0.000004879 0.000016466 0.000004924 -0.000049593 0.000001725 -0.000023507 -0.000001571 0.000003953 0.000024229 0.000039256 0.000008271 -0.000015734 0.000000677 -0.000044672 -0.000070462 -0.000019509 0.000022277 -0.000003902 -0.000014396 0.000007063 -0.000015156 -0.000003405 0.000000371 -0.000011641 -0.000004682 -0.000002639 -0.000000178 0.000000687 -0.000007642 0.000007859 -0.000000839 -0.000003994 0.000000941 0.000001892 0.000009627 -0.000001152 -0.000002564 0.000000330 -0.000003469 0.000004243 0.000004058 -0.000004558 0.000000472 -0.000002287 -0.000005930 0.000000687 0.000001952 0.000000415 -0.000033963 -0.000006103 -0.000022301 0.000013329 -0.000003129 -0.000027984 -0.000029083 -0.000010928 0.000011934 -0.000003907 0.000057678 0.000056392 0.000013071 -0.000019655 0.000001007 0.000054366 0.000071534 0.000023955 -0.000028243 0.000004307 0.000017791 0.000009378 0.000007425 -0.000001144 -0.000002733 -0.000013292 0.000004315 -0.000016752 -0.000001620 0.000005723 0.000006206 -0.000003149 0.000003794 0.000001350 -0.000001148 0.000007743 0.000002128 0.000011027 -0.000000681 -0.000000690 -0.000020039 -0.000006211 -0.000013132 -0.000000444 0.000002489 0.000001488 0.000005421 -0.000000602 -0.000000905 0.000000168 -0.000000034 0.000005148 0.000001671 -0.000000929 0.000000723 -0.000003741 -0.000005920 -0.000000331 0.000000799 -0.000000255 -0.000050804 -0.000016291 -0.000026589 -0.000000195 0.000003326 0.000015753 -0.000037577 0.000037386 -0.000000050 -0.000003783 -0.000046094 -0.000008868 -0.000031692 0.000000131 0.000002587 0.000004045 -0.000007837 0.000007974 -0.000000649 -0.000000531 -0.000020216 0.000003277 -0.000020080 -0.000002348 0.000002385 -0.000000670 -0.000007550 0.000002930 -0.000001747 -0.000000254 0.000022471 0.000004606 0.000017105 0.000002247 -0.000002166 -0.000009720 0.000017269 -0.000017598 0.000000216 0.000001201 0.000026687 0.000006584 0.000014456 0.000002030 -0.000003556 -0.000002508 -0.000001067 -0.000000082 0.000000688 0.000000488 -0.000012663 -0.000005739 -0.000007021 -0.000001395 0.000000988 0.000004060 0.000002418 0.000000457 0.000000781 -0.000001137 0.000000869 0.000000017 -0.000001331 -0.000000471 -0.000000872 -0.000010897 -0.000015856 -0.000000772 0.000000574 0.000000388 -0.000011612 -0.000006959 -0.000002513 -0.000000343 0.000001723 -0.000000590 0.000002999 -0.000002920 -0.000000377 0.000000091 -0.000006343 0.000003119 -0.000007067 -0.000001105 0.000000835 -0.000001747 0.000000024 -0.000000190 -0.000000175 0.000000793 -0.000017464 0.000002552 -0.000014131 -0.000002095 0.000002788 0.000021854 0.000001859 0.000016350 0.000002960 -0.000002679 -0.000010967 0.000001482 -0.000010162 -0.000000942 0.000001033 -0.000009302 -0.000005084 -0.000003982 -0.000002078 0.000001446 -0.000020744 0.000004660 -0.000019955 -0.000001577 0.000001877 -0.000005602 -0.000003062 -0.000003652 -0.000000981 0.000000312 0.000001898 -0.000003308 0.000002429 0.000000428 -0.000000861 0.000001448 0.000001933 0.000000078 0.000000391 -0.000000258 -0.000000590 -0.000003148 0.000002057 -0.000000415 0.000000314 -0.000000401 -0.000001109 -0.000000399 0.000000334 -0.000000386 -0.000002263 0.000004616 -0.000004098 -0.000000630 0.000000909 -0.000001912 -0.000001692 0.000000243 -0.000000104 0.000000444 -0.000004526 -0.000003480 0.000001136 -0.000007322 0.000002600 0.000008591 0.000001201 0.000010770 -0.000004432 0.000004599 -0.000008930 0.000006554 -0.000011436 0.000002336 0.000000363 -0.000004158 0.000000389 -0.000003760 0.000000326 0.000000477 0.000001068 0.000002318 -0.000003080 0.000006445 -0.000001671 -0.000000042 -0.000001874 0.000000594 -0.000000682 -0.000001229 0.000006539 -0.000001706 0.000006125 -0.000001418 -0.000001063 0.000003060 -0.000000116 0.000001699 0.000003316 -0.000000868 -0.000003333 0.000001199 -0.000002347 -0.000001876 0.000002134 0.000000976 0.000002452 -0.000004611 0.000008459 -0.000003504 -0.000003573 -0.000000302 -0.000001264 -0.000002574 0.000001254 0.000002058 -0.000000765 0.000000968 0.000003132 -0.000001576 -0.000002625 -0.000003124 0.000000212 -0.000003198 0.000003601 0.000019851 -0.000006560 0.000019165 -0.000003159 -0.000003004 -0.000009991 0.000006996 -0.000014809 0.000001562 -0.000002429 0.000000458 0.000005755 -0.000002632 0.000002824 0.000000948 -0.000005042 -0.000005814 0.000003558 -0.000007978 0.000003004 -0.000005590 0.000001762 -0.000004476 0.000004960 0.000001648 -0.000035958 0.000017941 -0.000038091 0.000004515 0.000005691 -0.000007813 0.000014358 -0.000015127 0.000011391 0.000000642 0.000032624 -0.000013432 0.000039245 -0.000005948 0.000006472 -0.000009458 -0.000004625 -0.000007503 -0.000005227 -0.000003187 0.000004081 0.000003834 -0.000001760 0.000005540 -0.000002059 -0.000003697 -0.000002186 -0.000001263 -0.000000636 -0.000000139 0.055884163 -0.002491575 0.430292727 -0.002754063 0.139721846 0.936640600 -0.000758570 -0.191133795 0.238699426 0.698017069 -0.000421829 -0.002662621 0.001297091 -0.002537166 0.041595048 -0.001335148 0.003000392 -0.002584187 -0.003303716 -0.016532154 0.000097562 -0.000561052 -0.000351826 -0.002304280 -0.053571916 -0.000264755 0.000692122 -0.000717110 -0.000025673 -0.003276186 0.000124026 0.000136611 -0.000166666 -0.000876156 0.001536298 -0.000050169 0.000428758 0.001086072 0.000911841 -0.001849431 -0.000005077 -0.000120814 -0.000105466 0.000103682 -0.000001492 -0.000002762 -0.000093712 -0.000044457 0.000084197 -0.000004937 0.000001944 -0.000014171 -0.000003880 0.000026857 0.000000532 -0.000002090 0.000027017 0.000025642 -0.000023719 -0.000000122 0.000001706 0.000091219 0.000077707 -0.000078123 0.000001501 0.000002772 0.000041111 0.000034495 -0.000028086 0.000000966 -0.000012419 -0.000129914 -0.000142073 0.000108842 0.000000735 -0.000002752 -0.000150949 -0.000134256 0.000134758 -0.000000870 -0.000001339 -0.000033847 -0.000029358 0.000025425 -0.000000257 0.000007331 0.000050372 0.000071370 -0.000042084 -0.000001761 -0.000000699 0.000030528 0.000025384 -0.000036384 -0.000000158 0.000001423 -0.000004852 -0.000006477 0.000010222 0.000000525 -0.000002490 -0.000020991 -0.000031264 0.000023412 0.000001367 -0.000011565 -0.000080753 -0.000094595 0.000060112 0.000000560 -0.000002115 -0.000032661 -0.000036564 0.000034931 0.000001345 0.000000838 0.000035404 0.000034417 -0.000034305 -0.000000486 -0.000000297 0.000016642 -0.000006950 -0.000008906 0.000003092 -0.000002782 -0.000024355 -0.000005179 0.000010844 -0.000003058 -0.000001191 -0.000017334 -0.000007032 0.000006640 -0.000001998 0.000002156 0.000010554 0.000019066 0.000001453 0.000000360 -0.000001551 -0.000026194 -0.000014732 0.000007850 -0.000002676 0.000003017 0.000419431 0.000360240 -0.000358882 0.000007136 0.000037972 0.000289833 0.000393477 -0.000240443 -0.000007635 -0.000001397 -0.000107372 -0.000024881 0.000024787 -0.000014744 -0.000000582 0.000015019 0.000009789 -0.000013068 0.000000641 0.000001361 0.000006521 0.000010888 0.000001244 0.000000123 -0.000009203 -0.000014884 -0.000024370 -0.000009047 -0.000001584 0.000000772 0.000001410 0.000002852 -0.000002880 -0.000000396 0.000004875 0.000027022 0.000029232 -0.000018880 0.000000025 -0.000005140 0.000036737 0.000026160 -0.000047776 -0.000000696 -0.000159201 -0.148332238 0.056003988 0.136064811 -0.001258572 0.001481469 0.056154720 -0.266354044 -0.203337185 -0.001085628 0.001343995 0.135221157 -0.209490694 -0.420393948 0.001646192 0.001551364 -0.159413466 -0.165545236 0.010217416 0.000573169 0.002511403 -0.164985325 -0.553568482 -0.054988180 0.001060930 -0.001238231 0.010779360 -0.049159534 -0.131254869 0.000483189 0.000007709 -0.000108702 -0.000081390 0.000111434 -0.000000998 -0.000028330 -0.000128253 -0.000221635 0.000099204 0.000006827 0.000001589 0.000035837 -0.000010533 0.000014629 0.000009155 0.000003190 -0.000253783 -0.000197883 0.000219476 -0.000005712 -0.000014920 -0.000112324 -0.000147144 0.000082068 0.000001003 0.000009516 0.000149391 0.000104355 -0.000070650 0.000010701 0.000038878 0.000100518 0.000100649 -0.000181560 -0.000040681 -0.000061357 0.000190868 0.000148120 -0.000250067 -0.000086043 -0.000042714 -0.000011687 0.000076529 -0.000075548 0.000017076 0.000026732 0.000106032 -0.000000327 -0.000053235 -0.000042657 0.000028888 0.000165779 0.000112282 -0.000173686 -0.000010113 -0.000009039 -0.000110108 -0.000055426 0.000099441 -0.000002105 -0.000014562 -0.000224149 -0.000141083 0.000263761 0.000043325 0.000005942 0.000056127 0.000040030 -0.000087858 -0.000003992 -0.000018590 -0.000134067 -0.000130606 0.000194314 0.000003703 -0.000006923 0.000011157 0.000024745 -0.000030699 0.000004337 0.000009104 0.000062957 0.000020776 -0.000066667 -0.000010047 -0.000010179 -0.000168095 -0.000102709 0.000169871 0.000026418 -0.000001609 -0.000029293 -0.000018027 0.000022000 -0.000006097 -0.000001915 -0.000020110 -0.000000186 0.000030977 0.000002894 0.000002109 0.000040673 0.000038442 -0.000050269 -0.000002980 0.000002580 0.000048479 0.000036324 -0.000062258 -0.000004046 0.000002484 0.000019424 0.000023627 -0.000022610 -0.000000760 -0.000002171 -0.000029870 -0.000017780 0.000040758 0.000004043 -0.000000108 0.000043537 0.000058585 -0.000081935 -0.000002245 -0.000005854 -0.000081716 -0.000052734 0.000079646 0.000013352 0.000015741 0.000135357 0.000071058 -0.000136817 -0.000013968 0.000014766 0.000157559 0.000086762 -0.000158747 -0.000023489 0.000008955 0.000074237 0.000045342 -0.000090717 -0.000007335 -0.000014751 -0.000058272 -0.000050974 0.000076464 0.000003979 0.000001168 -0.000002727 -0.000005521 0.000005653 0.000000963 0.000003937 0.000021862 0.000019510 -0.000018241 -0.000000552 -0.000007017 -0.000064398 -0.000038362 0.000067352 0.000000877 0.000001100 0.000020760 0.000014485 -0.000024021 -0.000001351 0.000001505 0.000028644 0.000027071 -0.000031005 -0.000000982 -0.000001274 -0.000036714 -0.000025151 0.000044347 0.000000731 -0.000015526 -0.000166752 -0.000113622 0.000167497 0.000000862 0.000001374 -0.000158473 -0.000091621 0.000199890 0.000004869 -0.000012039 -0.000127258 -0.000080835 0.000134002 0.000000917 0.000000277 -0.000045059 -0.000029112 0.000055426 0.000000583 -0.000005703 0.000001369 -0.000009894 -0.000011318 -0.000000082 -0.000001543 -0.000035772 -0.000030968 0.000032232 -0.000001695 0.000008027 0.000071888 0.000058045 -0.000066901 0.000001894 -0.000000760 0.000067234 0.000037911 -0.000089272 -0.000003269 0.000008577 0.000073220 0.000034460 -0.000075163 0.000001384 -0.000000843 -0.000000768 0.000009259 0.000007756 0.000001324 -0.000004845 -0.000045742 -0.000038924 0.000043619 0.000001919 0.000001002 0.000009728 -0.000004452 -0.000010042 0.000000876 -0.000000219 -0.000015073 -0.000024380 0.000013111 -0.000000066 -0.000004640 -0.000080953 -0.000045632 0.000098795 0.000003163 -0.000003735 -0.000032809 -0.000011253 0.000038123 0.000001969 -0.000000352 0.000014041 -0.000000643 -0.000022950 -0.000000286 -0.000001908 -0.000003064 -0.000008858 -0.000006016 -0.000001970 -0.000000549 0.000004712 0.000011535 -0.000004302 0.000000166 -0.000005465 -0.000012732 -0.000004546 0.000001045 -0.000002563 0.000007164 0.000042078 0.000031227 -0.000032681 0.000001775 -0.000004003 -0.000008114 -0.000013447 -0.000000863 -0.000000752 -0.000003736 -0.000040979 -0.000025509 0.000037056 -0.000001083 -0.000005544 -0.000014719 -0.000026732 -0.000000526 -0.000001611 -0.000002532 -0.000021234 -0.000024544 0.000015332 0.000000163 0.000000390 -0.000019404 -0.000017166 0.000023144 0.000000445 0.000000865 0.000012003 0.000009019 -0.000009521 0.000000079 -0.000000168 -0.000023465 -0.000009472 0.000026825 -0.000000672 -0.000000300 -0.000006118 -0.000008073 0.000007676 0.000000709 -0.000000705 0.000025521 0.000014467 -0.000035761 -0.000000598 -0.000000492 -0.000012251 -0.000000045 0.000017204 -0.000000051 -0.000006766 -0.000012199 -0.000019689 -0.000007651 -0.000001807 0.000013028 -0.000101725 -0.000021744 0.000074922 -0.000008651 0.000000089 0.000024472 0.000007382 -0.000023734 0.000002355 -0.000003309 0.000014600 0.000012223 -0.000011295 0.000000558 0.000000398 0.000051045 0.000045495 -0.000024345 0.000002870 -0.000001437 -0.000003091 -0.000025798 -0.000004303 0.000001442 0.000006562 -0.000071968 -0.000051359 0.000058349 -0.000002180 0.000001167 0.000015808 0.000035125 0.000010260 0.000000308 -0.000001492 -0.000003578 0.000007711 -0.000005376 -0.000001713 -0.000000610 0.000071712 0.000048683 -0.000033918 0.000005243 -0.000001943 -0.000014033 -0.000007757 0.000003144 -0.000001700 -0.000000423 0.000024546 0.000026226 0.000000137 0.000001603 -0.000007334 0.000020237 -0.000050770 -0.000043924 0.000005245 0.000014827 -0.000161735 -0.000131271 0.000124158 -0.000004402 0.000001749 0.000017434 -0.000005292 -0.000010282 0.000002446 0.000006898 0.000002876 0.000048011 0.000006312 -0.000004244 -0.000006016 -0.000054743 -0.000040966 0.000027961 -0.000003414 -0.000007241 0.000104400 0.000122241 -0.000061237 0.000000141 -0.000008753 0.000111905 0.000083767 -0.000097320 0.000003194 0.000010205 0.000072481 0.000133668 -0.000038796 -0.000002583 0.000007882 -0.000068332 -0.000006461 0.000058861 -0.000006521 -0.000011783 -0.000010566 -0.000077730 -0.000008695 0.000004137 0.000004414 0.000030851 0.000024268 -0.000010879 0.000002743 -0.000005074 0.000009829 -0.000000484 -0.000008498 0.000000752 0.122508333 0.133266139 0.288142122 0.001771609 -0.001758693 0.062767797 0.000162411 0.000633504 0.098990806 0.325786057 0.000121332 0.000324392 0.001643527 0.033939676 0.058577323 -0.000002466 0.000000009 -0.000002113 0.000004779 0.000013717 0.000000831 -0.000004440 -0.000008075 0.000003629 0.000009879 0.000000733 -0.000000210 -0.000001367 -0.000000105 0.000002654 0.000001006 -0.000000978 -0.000001093 -0.000000526 -0.000001878 0.000001395 0.000000115 0.000001626 -0.000002336 -0.000007447 0.000000254 0.000000743 0.000001866 -0.000001702 -0.000003371 -0.000002571 0.000001108 -0.000000411 0.000005878 0.000016671 -0.000003074 0.000000484 -0.000001716 0.000004815 0.000015777 -0.000000707 -0.000000105 -0.000000627 0.000001226 0.000003393 0.000001407 -0.000001534 -0.000001502 -0.000002383 -0.000007675 0.000000063 0.000000193 0.000000942 -0.000000069 -0.000002760 -0.000000435 0.000000602 0.000000673 -0.000000348 0.000000375 -0.000001326 0.000001140 0.000001849 0.000001658 0.000007112 -0.000001461 0.000000357 -0.000000564 0.000004825 0.000011952 -0.000000640 0.000000856 0.000000582 0.000001019 0.000004667 0.000000698 -0.000000708 -0.000000388 -0.000001362 -0.000004606 -0.000000364 0.000002311 0.000003270 -0.000000877 -0.000000643 0.000000374 -0.000002532 -0.000003690 0.000001843 0.000002303 0.000000058 -0.000001315 -0.000001796 0.000001061 0.000000760 0.000000718 -0.000000301 -0.000000635 -0.000000642 0.000000061 -0.000000301 -0.000001422 -0.000001907 0.000001296 0.000000519 0.000007720 -0.000001060 0.000006209 -0.000012224 -0.000032480 0.000007341 -0.000007051 -0.000005519 -0.000011098 -0.000036121 -0.000000102 -0.000007173 -0.000010319 0.000005375 -0.000003056 0.000000222 0.000000097 0.000000570 0.000000048 0.000000153 0.000000014 -0.000000062 0.000000016 -0.000000430 0.000000009 -0.000000006 -0.000000874 -0.000000891 0.000002125 0.000001232 -0.000000014 -0.000000091 0.000000110 -0.000000258 -0.000000805 0.000000140 0.000000386 0.000000842 -0.000002108 -0.000004755 0.000000281 -0.000000507 0.000000234 0.000000637 -0.000002246 -0.000264883 0.001792654 -0.000111811 -0.000128823 0.000000263 0.001639037 0.003276717 0.000021768 0.000046768 -0.000110405 0.002273065 -0.000908312 0.000134523 0.000204408 -0.000086368 -0.000010992 -0.000024364 -0.000491662 -0.000190619 0.000295688 0.001480168 -0.000217462 -0.000024587 -0.000333146 0.000468607 0.000749709 0.000270104 -0.000000554 0.000286721 -0.000441758 -0.000002206 0.000001011 -0.000001284 0.000001892 0.000008072 -0.000003631 0.000005071 0.000005397 0.000006271 0.000019805 -0.000000560 0.000004790 0.000006280 -0.000002473 0.000004919 -0.000004226 -0.000000014 -0.000005087 0.000007012 0.000017754 -0.000002888 0.000001858 0.000001185 0.000004573 0.000011808 0.000001840 0.000004672 0.000007322 -0.000006533 -0.000005028 0.000001770 0.000009102 -0.000157033 0.000228665 0.000102486 0.000000741 0.000006753 -0.000216496 0.000096841 0.000184348 -0.000027833 0.000028362 -0.000117005 -0.000061557 -0.000157124 0.000012237 -0.000007916 0.000012952 0.000076504 0.000109305 -0.000003826 0.000004083 0.000023500 0.000007451 -0.000035902 0.000013006 -0.000009819 -0.000019490 0.000030720 0.000007874 -0.000004973 -0.000000745 0.000016065 -0.000054105 -0.000014721 -0.000006950 0.000008049 -0.000002862 -0.000003244 -0.000034579 0.000011095 -0.000015234 0.000032681 -0.000006761 0.000061507 -0.000000505 -0.000000697 -0.000002477 -0.000004796 -0.000015284 0.000000445 -0.000001235 0.000008808 0.000013643 0.000012805 -0.000003069 0.000000964 0.000002875 -0.000026331 -0.000029617 -0.000000937 0.000001048 -0.000020455 0.000012948 0.000000090 0.000003151 -0.000001666 0.000001572 -0.000001031 0.000001219 -0.000000179 0.000000634 0.000002912 -0.000004371 -0.000007809 -0.000001623 0.000001439 0.000000587 -0.000001396 -0.000010011 0.000000065 0.000000645 -0.000002513 0.000000432 -0.000004805 0.000001367 -0.000001524 -0.000000208 -0.000001536 0.000005488 -0.000004783 0.000006110 -0.000021270 -0.000014612 -0.000043037 -0.000000397 -0.000001467 0.000012773 -0.000021555 -0.000007076 -0.000004844 0.000005515 0.000000638 0.000021036 0.000003255 -0.000000315 0.000001222 0.000001894 0.000030533 0.000023487 -0.000006345 0.000007045 -0.000001311 -0.000002655 -0.000019429 0.000009557 -0.000011194 0.000008257 0.000010644 0.000035475 -0.000000106 0.000000579 0.000001592 -0.000001111 -0.000000084 -0.000000281 0.000000895 0.000002914 -0.000002809 -0.000004673 0.000002599 -0.000003465 -0.000009109 0.000006048 0.000011118 -0.000000706 0.000000708 0.000000501 -0.000000356 -0.000003289 0.000000630 -0.000000173 0.000000084 -0.000001263 -0.000004631 0.000001102 -0.000000621 -0.000004804 0.000003673 0.000006794 0.000006135 -0.000008106 -0.000024479 0.000015528 0.000022411 0.000009683 -0.000007088 -0.000017795 0.000009730 0.000008384 0.000005394 -0.000006863 -0.000020308 0.000011706 0.000018328 0.000000849 -0.000001162 -0.000005344 -0.000000386 0.000004414 -0.000001486 0.000001458 0.000003575 0.000000729 0.000008496 -0.000001315 0.000000264 -0.000000975 0.000001843 0.000005379 0.000002589 -0.000000757 -0.000002592 -0.000000713 -0.000028712 -0.000004259 0.000003203 0.000003289 -0.000005339 -0.000007050 -0.000003771 0.000005341 0.000013052 -0.000005977 -0.000015421 0.000002743 -0.000001807 -0.000003396 0.000000714 0.000004240 0.000000860 -0.000000274 0.000004508 0.000004594 0.000012999 -0.000002583 0.000003035 0.000008920 -0.000002109 0.000006614 -0.000003765 0.000003760 0.000014520 -0.000000310 0.000013137 0.000005265 -0.000004568 -0.000007188 0.000009900 0.000017225 0.000004765 -0.000004699 -0.000009074 0.000004564 -0.000003492 -0.000002424 0.000001533 0.000004768 -0.000001398 -0.000002683 -0.000002818 0.000001378 0.000001589 -0.000001707 0.000001592 0.000002151 -0.000001843 -0.000003286 0.000001329 -0.000001756 0.000000043 -0.000001777 -0.000003289 0.000001385 0.000004311 0.000000302 0.000001604 0.000001809 -0.000003732 -0.000010192 -0.000000984 -0.000000023 0.000000035 0.000001126 0.000003868 0.000001286 -0.000002127 -0.000003916 0.000003674 0.000006529 -0.000003870 0.000002181 0.000003573 0.000000377 0.000005334 -0.000000503 -0.000000146 -0.000000264 0.000001860 0.000002021 -0.000000357 0.000000530 0.000000101 0.000000488 0.000003154 -0.000000404 0.000000619 0.000001176 -0.000001134 -0.000001082 0.000000550 -0.000000837 -0.000002124 0.000000923 0.000003749 -0.000000280 0.000000506 0.000001237 0.000000186 0.000002857 -0.000000633 0.000000134 0.000001227 -0.000000877 -0.000005033 0.000001456 -0.000001096 -0.000002454 0.000000850 0.000003122 0.000000262 -0.000001400 -0.000001158 0.000001362 0.000001061 -0.000001441 -0.000003566 -0.000005486 0.000001765 0.000000674 -0.000001228 0.000002027 0.000002544 -0.000000340 -0.000002112 0.000000511 0.000000191 0.000000252 -0.000000012 -0.000000311 0.000001208 0.000000700 0.000001200 -0.000001657 -0.000001099 -0.000000567 0.000000978 0.000001295 0.000000237 0.000000574 -0.000002595 0.000001138 0.000000318 0.000000944 0.000000660 0.000001128 0.000000019 -0.000000528 -0.000000770 0.000000552 0.000000206 -0.000001178 -0.000001126 0.000000399 -0.000000839 0.000001616 0.000001999 0.000002470 -0.000002305 -0.000001265 -0.000000258 -0.000000869 -0.000001033 0.000000762 0.000000042 0.000001268 0.000000582 0.000000181 -0.000000814 0.000000753 -0.000001319 0.000002951 0.000005451 0.000000960 0.000001271 -0.000005122 0.000002407 0.000000098 0.000001805 0.000001373 -0.000001116 0.000003356 0.000004297 -0.000000039 0.000000060 0.000001506 -0.000003431 -0.000005383 -0.000000698 -0.000002217 -0.000001021 -0.000001384 -0.000001349 0.000002623 0.000003284 0.000005786 -0.000004711 -0.000005545 -0.000001920 -0.000000882 0.000001633 0.000000614 0.000002487 0.000000104 -0.000002037 0.000002303 -0.000004392 -0.000005020 -0.000001846 -0.000003595 0.000001013 -0.000004961 -0.000005786 0.000000792 0.000002712 -0.000001545 0.000004614 0.000005222 0.000001029 0.000000956 -0.000000293 0.000001996 0.000003106 -0.000001575 -0.000001402 0.000000761 -0.000000244 -0.000000503 0.000000225 0.000000856 0.668109757 0.057239363 0.653449571 -0.109901647 0.233090879 0.281212978 -0.248028352 -0.158469460 -0.022506072 0.741402222 -0.092947756 -0.239512694 -0.056473946 0.053835205 0.622989987 0.010683689 -0.035942769 -0.085057146 -0.145571780 0.199316057 0.050265628 -0.001298668 -0.013796640 -0.141006780 0.028838249 -0.055080330 -0.045039407 -0.011067727 0.087751861 -0.276224626 -0.039161925 -0.023344706 0.007247747 0.063222238 -0.097695405 -0.067745963 -0.024771454 0.006446853 0.007575870 0.078188814 -0.018369326 -0.010217063 0.004833259 0.030115371 0.014920229 0.008314474 0.005495585 -0.005941707 0.014181692 -0.018906065 0.010981193 0.034695319 0.016409380 -0.006556806 -0.019673565 0.078028690 0.019622659 -0.020178658 -0.015404295 -0.063286939 0.035173535 -0.004265935 -0.003545333 -0.006387822 -0.020579622 -0.072074425 0.051989538 0.034550002 0.008881899 -0.019980004 0.053921969 -0.257315518 -0.124997108 0.006539863 -0.013564662 0.034651986 -0.127039037 -0.110948832 0.002680851 -0.001075995 -0.012181381 0.005174582 0.007405814 -0.312435940 0.039628873 -0.020839422 0.008448587 0.007879170 0.037434550 -0.061443864 -0.004906052 -0.000248075 0.005889227 0.096650347 -0.021265729 0.006688915 0.005771696 0.004613120 0.010490127 -0.016115861 0.007832479 -0.000802077 -0.005926087 -0.025559109 -0.032854906 0.001859567 -0.007257052 0.004624308 -0.013485325 -0.005499561 -0.000908332 -0.000381720 -0.000149004 -0.004783802 -0.001112773 -0.000760891 0.000076360 0.000634872 -0.000149690 0.002335092 -0.000031513 0.000925857 -0.000505997 0.002687232 -0.001666097 0.001549523 0.000233741 0.001134768 0.000543208 -0.000315198 -0.000587032 -0.002955313 -0.004623193 -0.000250562 -0.000774905 0.001894600 -0.004823224 0.003581022 -0.000726669 -0.000681027 0.000053781 0.000050106 0.000007566 -0.000012180 -0.000042089 0.000019783 -0.000004298 -0.000003140 -0.000005773 -0.000013516 -0.000046949 -0.000043563 -0.000016854 0.000010563 0.000036675 0.000071979 0.000047308 0.000002048 -0.000017545 -0.000054321 0.000069482 0.000035385 0.000003940 -0.000014670 -0.000049838 -0.000023786 -0.000019537 -0.000009526 0.000005762 0.000018365 0.000100188 -0.001860231 -0.001231563 -0.004385447 -0.000656952 -0.002385319 -0.002766048 0.000677434 -0.006473655 0.002461119 -0.000736668 -0.000188294 -0.000596611 -0.001967315 -0.000674077 -0.001289506 -0.000716210 -0.000947303 -0.002246861 0.005598495 -0.000567020 0.001570248 0.001146731 -0.002639787 -0.005658716 0.001221153 0.001634109 0.000075090 -0.000842846 -0.006652670 0.000002596 -0.000010693 -0.000006668 0.000002009 0.000004205 0.000032612 0.000028530 0.000010918 0.000001703 -0.000005764 -0.000027881 -0.000018284 -0.000005137 0.000000074 0.000006853 0.000005416 0.000011690 0.000007978 0.000000387 0.000002284 0.000074315 0.000068361 0.000022162 -0.000011982 -0.000032972 -0.000109513 -0.000126188 -0.000031714 -0.000000459 0.000046884 -0.000031825 -0.000025228 -0.000002573 -0.000000859 0.000011551 -0.000008512 -0.000003547 -0.000001657 0.000000509 0.000003656 0.000002659 -0.000000188 0.000003592 -0.000000752 -0.000000210 0.000002163 0.000000184 -0.000003422 0.000002735 -0.000000420 0.000012643 0.000009104 0.000000612 -0.000000344 -0.000004808 -0.000028587 -0.000022557 -0.000003921 -0.000000469 0.000011391 -0.000009677 -0.000009262 -0.000002622 0.000001257 0.000005855 0.000001396 0.000001690 0.000001166 0.000000481 -0.000001657 -0.000008398 -0.000006078 -0.000002452 0.000001794 0.000005172 -0.000012890 -0.000009811 -0.000004057 0.000001729 0.000007297 -0.000003707 -0.000002834 -0.000001315 0.000001220 0.000001450 -0.000003386 -0.000002343 -0.000000530 0.000000459 0.000001236 -0.000014518 -0.000008004 -0.000007488 0.000005478 0.000004705 -0.000021784 -0.000017478 -0.000005585 -0.000003254 0.000006919 0.000069510 0.000056681 0.000012218 -0.000004735 -0.000034265 0.000029412 0.000022038 0.000005500 0.000000035 -0.000012236 0.000019773 0.000013739 0.000005088 -0.000003927 -0.000010180 -0.000001386 0.000002423 0.000001715 -0.000000438 0.000005427 0.000023470 0.000017752 0.000006808 -0.000005645 -0.000011625 -0.000002003 -0.000002548 -0.000002959 0.000004997 -0.000001052 -0.000048135 -0.000032680 -0.000008457 0.000008301 0.000022230 0.000001805 0.000001572 -0.000000962 0.000000676 -0.000002221 -0.000005160 -0.000004720 -0.000002833 0.000002878 0.000002370 0.000003438 0.000002560 0.000001705 -0.000000368 -0.000002251 0.000064836 -0.000372169 0.000065610 -0.000067768 -0.000014741 0.000393890 -0.000147379 -0.000121427 0.000118680 0.000244936 0.000119374 -0.000085066 0.000163767 0.000044072 -0.000037847 0.000237452 0.000711902 0.000031264 0.000194366 -0.000058619 0.000010787 0.000382806 -0.000703213 -0.000090942 0.000221384 -0.000911463 -0.000695905 -0.000434379 0.000200528 0.000702732 -0.000011397 0.000095796 0.000079720 0.000023678 -0.000038690 -0.000314852 -0.000001015 -0.000025395 -0.000039898 -0.000004675 0.000033680 0.000164950 0.000076428 -0.000000876 -0.000075435 -0.000120895 -0.000124552 -0.000003918 -0.000040642 0.000007515 0.000011528 -0.000198184 -0.000116294 0.000018042 0.000129294 -0.000091063 -0.000109456 -0.000009091 -0.000027618 0.000016097 -0.000025655 -0.000025610 -0.000012936 0.000007199 0.000022827 -0.000034414 -0.000019861 -0.000000437 0.000009043 0.000018526 -0.000039176 -0.000026944 -0.000009781 0.000007735 0.000017261 -0.000016194 -0.000010374 -0.000001364 0.000003162 0.000009935 -0.000023665 -0.000020172 -0.000008582 0.000003457 0.000013658 -0.000010200 -0.000000386 0.000002204 0.000004999 0.000001689 -0.000114216 -0.000096543 -0.000079272 -0.000034601 0.000068336 0.000171861 -0.000042330 0.000182011 -0.000087706 -0.000184732 -0.000139228 -0.000135511 -0.000162133 0.000001735 0.000100982 -0.000093279 -0.000066148 -0.000130713 0.000052851 0.000141825 0.000007493 0.000046508 -0.000022819 0.000022956 0.000016225 0.000005811 -0.000022989 -0.000073154 0.000027809 0.000083719 0.000037868 0.000016201 0.000014537 -0.000006647 -0.000019188 0.000007971 -0.000005505 -0.000036093 -0.000020427 -0.000007004 -0.000000515 0.000052729 0.000031830 0.000011669 -0.000018934 -0.000008627 -0.000013316 -0.000016514 0.000004401 0.000012813 -0.000043944 -0.000039023 -0.000023914 0.000005247 0.000030231 0.000001113 0.000012976 0.000008333 -0.000002067 -0.000005038 -0.000046464 0.000007931 -0.000002000 0.000077123 0.000018835 -0.000043323 0.000010091 0.000021206 -0.000026051 0.000038329 0.000012453 -0.000015657 -0.000032927 -0.000020813 -0.000020455 0.000000139 0.000000753 -0.000006655 -0.000006500 -0.000010619 0.000057811 -0.000013218 -0.000025977 -0.000037017 -0.000019991 -0.000022013 0.000001803 0.000007437 0.000001874 0.000009006 0.000005727 -0.000001714 0.000011159 -0.000017928 0.000005700 -0.000006208 0.000000330 0.000006387 0.000020972 0.000002643 0.000027557 0.000000159 -0.000011647 -0.000030060 -0.000012931 0.000071213 0.000003070 -0.000024042 -0.000091885 -0.000030987 -0.000025565 0.000012825 0.000004923 0.000029715 -0.000000245 -0.000029459 0.000005932 0.000016844 0.000025893 0.000004747 0.000093368 -0.000078706 0.000158869 -0.000384719 -0.000001676 0.000218840 0.000156041 0.000032681 -0.000151457 -0.000233914 0.000035067 -0.000224940 -0.000186355 -0.000078725 0.000298576 -0.000077628 0.000111607 0.000072898 0.000333940 0.000012539 -0.000250614 0.000089016 0.000325942 0.000277747 0.000100107 0.000009831 0.000052258 -0.000213417 0.000290924 -0.000024804 -0.000022582 -0.000015222 -0.000058266 0.000018625 0.000057431 -0.000026201 -0.000013632 -0.000026184 0.000146826 0.000105751 0.000105676 0.000108498 0.000006860 -0.000332158 -0.000059038 -0.000120809 0.000010026 -0.000057217 0.000236207 -0.000162611 0.000105009 -0.000089159 -0.000327990 -0.000325727 -0.000114979 -0.000050757 -0.000004911 0.000172933 0.000038940 0.000370429 0.273020480 0.035860774 0.650063151 -0.114764824 -0.026677533 0.593925664 -0.125818977 -0.173834942 0.213238095 0.300348170 0.037078305 -0.304239137 0.014867988 0.076228665 0.675718343 -0.007178066 0.073823160 -0.124691043 -0.049674293 0.050831669 -0.002665456 0.103099022 -0.032920993 -0.110723330 -0.124958298 -0.009306744 -0.046997321 -0.009301742 0.011079281 -0.251308299 -0.021820594 -0.061560746 0.042486157 0.034317550 -0.088860462 -0.013560158 -0.012093611 0.017187954 0.018983143 0.003476975 -0.011194630 -0.002030063 -0.003396662 0.001277465 -0.001335091 -0.010316054 -0.004488820 0.000620741 -0.002016935 0.000199199 0.002347536 0.001283935 -0.002780562 0.005531365 -0.000839328 0.095944498 -0.003085658 -0.000473490 0.002310036 0.001806769 -0.021137990 0.024564393 0.002960658 -0.008097376 -0.000421245 -0.075642081 0.012651928 -0.001917816 -0.000214946 0.000711506 -0.012660892 -0.129824283 -0.018262266 0.003828149 -0.031920918 -0.007351619 -0.019761984 -0.128132590 -0.012600780 -0.019344391 -0.000140287 0.004653832 -0.009624929 -0.087574138 -0.002960803 0.002597373 -0.000014096 0.024745051 0.012513018 -0.071057345 -0.001211410 0.000122195 -0.000550721 -0.002736942 0.055283112 0.003712058 0.001495304 -0.008352333 0.000305871 0.035557049 -0.000447974 -0.000483246 -0.003609219 -0.000088979 -0.014241890 0.000063011 -0.002812095 -0.001634456 -0.003568621 -0.022771001 -0.000911943 0.000224358 -0.002673545 0.006115524 -0.004521822 -0.000019492 0.000050613 0.000067739 0.000016334 -0.000015568 -0.000005543 0.000034234 0.000024721 0.000004824 -0.000020954 0.000012584 -0.000045318 -0.000063044 -0.000011780 0.000015591 -0.000024922 0.000078885 0.000087767 0.000020171 -0.000031793 -0.000022755 0.000092332 0.000087525 0.000019168 -0.000045474 0.000005293 -0.000024800 -0.000033300 -0.000005589 0.000009881 0.001665958 0.016068127 -0.024217574 -0.013755659 -0.006535870 0.001652981 -0.009855915 -0.047489817 -0.041839498 0.005085367 0.003318981 -0.004370843 -0.034140860 -0.001638062 0.006916656 0.004408183 -0.053567651 -0.018510694 0.032392131 0.003106347 -0.000857557 -0.032248880 0.011782784 0.012994329 0.000154662 -0.001709617 0.022953979 0.004448690 0.009384765 0.000174374 0.000004250 -0.000008068 -0.000004028 0.000002712 0.000011365 -0.000009799 0.000028354 0.000023577 0.000005756 -0.000013309 0.000004170 -0.000029376 -0.000025739 -0.000007011 0.000012696 0.000001952 0.000033730 0.000020659 -0.000001880 -0.000023246 -0.000032626 0.000087008 0.000082388 0.000019744 -0.000044726 0.000045987 -0.000130363 -0.000111033 -0.000021193 0.000075736 0.000006197 -0.000027371 -0.000026107 -0.000008560 0.000009897 0.000001399 -0.000006186 -0.000007785 -0.000002352 0.000001601 0.000001383 0.000004288 0.000003572 -0.000000239 -0.000003554 -0.000001627 -0.000003374 -0.000001339 0.000001962 0.000006290 -0.000002280 0.000014016 0.000012512 0.000003388 -0.000006000 0.000006208 -0.000025450 -0.000024729 -0.000007115 0.000009584 0.000003500 -0.000011948 -0.000011914 -0.000002748 0.000005965 -0.000001241 0.000000538 0.000001779 0.000000805 0.000000712 0.000001636 -0.000011592 -0.000011296 -0.000002165 0.000005990 0.000002762 -0.000015733 -0.000015784 -0.000003065 0.000007438 -0.000000006 -0.000005341 -0.000004326 -0.000000426 0.000004039 -0.000000148 -0.000003381 -0.000002966 -0.000000774 0.000001906 -0.000002119 -0.000018402 -0.000014149 0.000001161 0.000018063 0.000008687 -0.000019788 -0.000019897 -0.000005907 0.000002763 -0.000007286 0.000069892 0.000068618 0.000017467 -0.000031738 -0.000007068 0.000029241 0.000028590 0.000008188 -0.000011195 0.000000497 0.000019074 0.000019191 0.000005130 -0.000011693 -0.000001662 -0.000000068 -0.000004348 -0.000002768 -0.000004859 -0.000004482 0.000028880 0.000027704 0.000005421 -0.000015259 -0.000004756 0.000001962 0.000003591 0.000001661 0.000009083 0.000003973 -0.000046184 -0.000045771 -0.000010624 0.000025343 -0.000000076 0.000001809 0.000002488 0.000001239 0.000000750 -0.000000136 -0.000008888 -0.000007133 -0.000000733 0.000008004 -0.000001871 0.000004247 0.000005161 0.000001305 -0.000001544 -0.000113567 -0.000079756 -0.000059675 0.000003000 0.000005067 0.000200035 -0.000046753 -0.000266346 -0.000136440 -0.000119730 -0.000049874 0.000037128 0.000019179 -0.000033726 -0.000058823 0.000446297 0.000158591 0.000072467 -0.000010769 0.000129696 0.000270027 -0.000254046 -0.000219146 0.000008332 0.000265037 0.000137053 -0.000197021 -0.000595168 -0.000223751 -0.000358219 -0.000031963 0.000072626 0.000083962 0.000018576 -0.000022575 -0.000095505 -0.000073469 0.000015455 0.000038243 0.000127163 -0.000016377 0.000103884 0.000112549 0.000028223 -0.000033292 -0.000092922 -0.000057781 -0.000011805 0.000009506 0.000067518 0.000080584 -0.000130749 -0.000190946 -0.000059714 0.000020570 -0.000066350 -0.000042606 -0.000016895 0.000001556 0.000040543 0.000008881 -0.000025487 -0.000033469 -0.000011642 0.000010831 0.000001641 -0.000025972 -0.000030896 -0.000010485 0.000012851 0.000001054 -0.000031518 -0.000032025 -0.000008300 0.000016249 0.000006077 -0.000011537 -0.000016406 -0.000005542 0.000003188 0.000006452 -0.000026158 -0.000026741 -0.000005542 0.000012431 -0.000003875 -0.000016662 -0.000010155 0.000000272 0.000011927 -0.000027466 -0.000153037 -0.000123217 -0.000026630 0.000102730 -0.000206117 0.000112995 0.000213811 0.000067936 -0.000023174 0.000002449 -0.000149674 -0.000151249 -0.000026466 0.000092391 0.000103330 -0.000116890 -0.000178606 -0.000050951 0.000018727 0.000073588 -0.000024139 -0.000043295 -0.000013393 -0.000000822 0.000105849 -0.000041631 -0.000096699 -0.000036538 0.000021278 -0.000002309 0.000029293 0.000031860 0.000007083 -0.000008585 -0.000005211 0.000014388 0.000021181 0.000010135 -0.000005253 -0.000012712 0.000007234 0.000012491 0.000003175 -0.000009687 0.000006648 -0.000010094 -0.000016510 -0.000006048 0.000002124 0.000005141 -0.000046328 -0.000049098 -0.000011628 0.000023584 -0.000003537 -0.000000293 0.000003884 0.000001844 0.000003500 -0.000018409 -0.000027487 -0.000030773 -0.000011780 -0.000010043 0.000017601 -0.000083715 -0.000060216 -0.000006600 0.000053784 0.000025888 -0.000072300 0.000058657 0.000023186 0.000043127 -0.000005477 -0.000005530 0.000011378 0.000010106 -0.000002928 -0.000004778 0.000059430 0.000065333 -0.000004659 -0.000024955 0.000013808 -0.000045113 -0.000022493 0.000009989 0.000010533 0.000002301 0.000028814 -0.000012543 -0.000007397 -0.000010277 -0.000006800 0.000008437 -0.000009446 -0.000001585 -0.000011497 -0.000001148 0.000023404 0.000025746 0.000005054 -0.000006096 0.000008488 0.000035020 0.000074538 0.000007555 0.000012318 -0.000006052 -0.000027089 -0.000021249 0.000008746 0.000008764 -0.000007636 -0.000019043 -0.000024682 0.000002128 0.000001265 0.000331488 0.000340586 -0.000097545 0.000062823 -0.000074271 0.000046832 0.000081749 0.000053902 0.000089704 0.000450408 -0.000997234 -0.000169223 0.000264059 -0.000054808 0.000210984 0.000114802 -0.000142597 -0.000022547 -0.000022017 0.000082436 0.000314018 0.000175575 -0.000345024 -0.000012979 -0.000400089 -0.001073701 0.000008639 -0.000119705 0.000094677 -0.000027580 -0.000003032 -0.000042543 -0.000075348 -0.000042357 0.000022147 -0.000000034 -0.000094615 -0.000036670 0.000011675 0.000035610 0.000139683 0.000076351 0.000047386 0.000015353 -0.000010752 0.000087188 -0.000181569 -0.000020156 0.000107126 -0.000081443 0.000277287 -0.000252403 0.000253550 -0.000071333 0.000095463 -0.000471374 -0.000057314 -0.000296844 -0.000191477 0.000117719 0.671730230 0.234171627 0.286448204 -0.158137843 -0.024792886 0.742309725 -0.238256309 -0.057609522 0.054656574 0.595412213 -0.040176946 -0.085064270 -0.124890363 0.205141236 0.272190924 -0.000587612 -0.000139197 -0.004896614 -0.000189471 0.002612239 0.000595306 0.000481132 0.000191512 0.001656933 -0.002292546 0.000205484 -0.000485181 0.002723597 -0.000884379 0.005116116 0.000376760 0.001280622 0.000439720 -0.000417725 -0.000593473 -0.003852434 -0.004011953 -0.000402261 -0.001123237 0.000036157 -0.003913743 0.003503453 -0.000392623 0.000378542 -0.000665863 -0.028282603 -0.002632589 -0.003320388 0.005337372 0.006807910 0.006781818 0.009600306 0.005343296 0.006995852 -0.001864958 0.010456590 0.002963687 0.006427420 -0.001697187 0.005723520 0.053973537 0.034935608 0.009773828 -0.019690668 -0.010447659 -0.273672844 -0.124243798 0.006788441 -0.010625010 -0.009360027 -0.123498988 -0.106519395 0.001275083 -0.002358436 0.003747594 0.005906211 0.007108600 -0.313059390 0.044961409 0.090722813 0.007278881 0.007034100 0.045749298 -0.064206169 -0.022844902 0.000529757 0.005597224 0.087704749 -0.023639674 -0.070913496 -0.000014018 0.000001407 0.000005718 0.000029709 0.000012567 -0.000003090 0.000001929 0.000009355 0.000024236 0.000008193 0.000019222 -0.000005476 -0.000008687 -0.000022493 -0.000017020 -0.000014559 0.000002561 0.000011132 0.000049817 0.000017241 -0.000017105 0.000003608 0.000021364 0.000062573 0.000023632 0.000010916 -0.000003718 -0.000006659 -0.000012007 -0.000010097 -0.002676425 -0.000148381 0.001940458 -0.000132032 -0.000781584 -0.001942637 -0.003115806 -0.000496333 -0.001107695 0.000274174 0.000626592 -0.000368868 -0.001411614 -0.001042520 -0.000598434 -0.006095688 -0.002154173 -0.002415742 -0.001916377 -0.001674702 -0.004702676 -0.002714363 -0.002154267 -0.000348382 0.000803185 0.000357643 0.003120524 -0.000188771 0.000714418 -0.000317397 0.000007367 -0.000003833 -0.000005854 -0.000004055 0.000002612 -0.000003201 -0.000000182 0.000015404 0.000017316 0.000008033 0.000006420 -0.000002222 -0.000006519 -0.000019247 -0.000010418 -0.000023218 0.000010814 0.000019776 0.000000613 0.000035220 -0.000009802 0.000005952 0.000055383 0.000051519 0.000017549 0.000020055 -0.000009084 -0.000068892 -0.000095579 -0.000025051 -0.000001361 0.000001794 -0.000011825 -0.000024377 -0.000004323 0.000001172 -0.000000710 0.000000314 -0.000003776 -0.000002582 -0.000003036 0.000001990 0.000004415 -0.000000687 0.000005043 0.000005174 -0.000003617 -0.000008477 0.000000818 -0.000002569 -0.000000828 -0.000000627 0.000006477 0.000012388 0.000003048 0.000000954 -0.000000057 -0.000007750 -0.000019061 -0.000005852 0.000002873 -0.000000520 -0.000005030 -0.000008495 -0.000002910 -0.000000684 -0.000000200 -0.000003167 -0.000000205 0.000001000 0.000003116 -0.000000377 -0.000005989 -0.000008534 -0.000003627 0.000004387 -0.000001004 -0.000006613 -0.000010887 -0.000005412 0.000000936 -0.000000626 -0.000007137 -0.000003495 -0.000001285 -0.000000090 0.000000054 -0.000004075 -0.000003151 -0.000000732 0.000006740 -0.000008663 -0.000023849 -0.000006271 -0.000005108 0.000008470 0.000001911 0.000014791 -0.000016331 -0.000008993 -0.000007083 0.000000017 0.000044527 0.000056887 0.000017011 -0.000003693 0.000000890 0.000008371 0.000020812 0.000011186 0.000001330 0.000000234 0.000027010 0.000014991 0.000005167 0.000001641 0.000002409 0.000012008 -0.000005588 -0.000002482 -0.000004551 0.000002347 0.000023770 0.000020981 0.000008585 -0.000008717 -0.000002154 -0.000036198 0.000007520 0.000005284 0.000001048 -0.000003179 -0.000045193 -0.000033998 -0.000011707 0.000000473 -0.000002005 -0.000002634 0.000003464 -0.000000253 0.000001335 -0.000001535 -0.000016000 -0.000005313 -0.000002764 -0.000002699 0.000000716 -0.000001618 0.000002199 0.000002159 0.000017790 -0.000001386 -0.000055986 0.000233854 -0.000004343 -0.000134943 0.000199343 -0.000496470 0.000548919 -0.000227341 -0.000057759 0.000009744 -0.000011921 0.000166142 -0.000028972 -0.000254318 0.000271119 -0.000172837 -0.000645758 0.000268843 0.000123571 -0.000209937 -0.000918179 -0.000954752 -0.000297841 0.000433655 0.000210088 0.001102127 0.000864186 0.000007904 0.000021677 -0.000045811 0.000123371 0.000019077 0.000041082 0.000078456 -0.000051796 0.000170684 -0.000400825 0.000086387 -0.000030671 -0.000026531 0.000108142 -0.000088637 0.000094979 -0.000001029 -0.000017920 -0.000038117 -0.000130610 0.000039995 -0.000024373 0.000076971 -0.000254764 0.000096936 -0.000122601 0.000008363 -0.000011016 -0.000001078 -0.000076838 0.000029574 -0.000002843 0.000000670 -0.000034901 -0.000021191 -0.000001787 -0.000006074 -0.000001898 -0.000037846 -0.000023460 -0.000002333 -0.000001429 -0.000003686 -0.000037579 -0.000020035 -0.000002825 -0.000003054 -0.000001226 -0.000009773 -0.000015856 0.000002076 0.000004247 -0.000000827 -0.000018536 -0.000017710 -0.000007834 0.000005974 -0.000005062 -0.000012652 -0.000004305 -0.000008093 -0.000017572 -0.000091355 -0.000356772 -0.000243317 -0.000083654 -0.000029060 -0.000121300 0.000042467 0.000094382 0.000117923 0.000043501 -0.000063603 -0.000188089 -0.000165808 -0.000070228 0.000029504 0.000082458 -0.000085383 0.000024424 -0.000104976 0.000016541 -0.000040367 -0.000062410 -0.000031721 -0.000037720 -0.000043618 0.000069653 -0.000170655 -0.000032600 -0.000057764 -0.000008217 0.000005397 0.000013376 0.000015156 0.000011014 0.000011833 0.000003004 0.000024937 -0.000003720 -0.000003458 0.000000344 -0.000002710 0.000034297 0.000028808 -0.000001444 0.000001909 -0.000004528 -0.000019742 -0.000005976 -0.000006309 0.000002070 -0.000007345 -0.000059399 -0.000039835 -0.000014805 -0.000004935 -0.000006804 -0.000020317 -0.000009648 -0.000002123 0.000005935 -0.000002742 -0.000010543 0.000008119 0.000002657 -0.000028127 -0.000037536 -0.000014557 -0.000051935 -0.000019622 0.000007316 -0.000007561 -0.000003685 -0.000043860 -0.000021852 -0.000002106 0.000001366 -0.000000091 0.000003009 -0.000003453 0.000017367 0.000025829 0.000019554 0.000022458 0.000009749 -0.000015546 -0.000018074 -0.000007965 -0.000010837 -0.000003436 -0.000004249 0.000001977 0.000003984 0.000010374 0.000005783 0.000005971 0.000007868 0.000001517 0.000008617 0.000005697 0.000004290 0.000005792 0.000005710 0.000006678 -0.000000032 -0.000001922 0.000003216 0.000016010 -0.000010434 -0.000006988 -0.000003563 -0.000008327 -0.000007885 -0.000007499 -0.000005062 -0.000003343 -0.000002843 -0.000004892 -0.000002330 0.000000527 -0.000045547 -0.000027612 0.000005029 0.000132561 0.000032137 -0.000007753 -0.000190564 -0.000084038 -0.000331085 -0.000141121 0.000021828 0.000029613 -0.000023095 -0.000159145 -0.000048007 -0.000017303 -0.000027661 -0.000026163 -0.000061024 -0.000008911 -0.000034046 0.000037576 0.000011708 0.000315797 0.000164548 0.000056073 0.000007341 -0.000052696 0.000014625 0.000008416 0.000028851 0.000012537 -0.000017053 0.000001003 -0.000009424 0.000016387 0.000007208 -0.000012367 -0.000011032 0.000004433 -0.000045407 -0.000000565 0.000070296 0.000008734 0.000000100 0.000002415 0.000004613 -0.000026257 0.000012046 -0.000013127 0.000011442 0.000057010 0.000067299 -0.000116347 -0.000081744 -0.000005870 -0.000043074 -0.000036372 -0.000079625 -0.000011350 0.072030384 -0.054009429 0.270209292 -0.039873458 0.137040436 0.105783222 0.000548605 0.000702769 -0.001192953 0.328304691 0.001062542 -0.000011055 0.001804652 -0.038268134 0.057047761 -0.000978731 0.002152075 -0.003259445 -0.104859425 0.024615388 0.000916803 0.000921014 0.000560821 -0.002610948 0.003434487 -0.000938571 0.000008428 -0.000114591 0.000422876 -0.000524279 -0.000352994 -0.000723277 0.000468902 0.000140375 -0.000147770 -0.000012790 0.000077678 -0.000182010 -0.000122162 0.001351500 0.000056593 -0.000191669 0.000226613 -0.000187532 0.000098911 -0.000146242 0.000231263 -0.000555639 0.000163875 -0.000574189 -0.000071685 -0.000048816 0.000036082 -0.000107592 0.000049872 0.001258104 -0.000151114 -0.000326155 0.000087168 -0.000098678 0.000750164 -0.000016536 -0.000120714 -0.000171258 0.000273834 -0.000014588 -0.000012536 0.000014754 0.000009539 -0.000002774 -0.000007379 0.000007392 -0.000003717 -0.000000576 -0.000007272 0.000016007 0.000005145 -0.000004502 -0.000001991 -0.000004095 -0.000020537 -0.000008522 0.000013908 0.000011746 -0.000010779 -0.000021837 0.000001606 0.000006738 0.000005622 -0.000011204 0.000008719 0.000000387 0.000000185 0.000000737 -0.000002452 -0.000354017 -0.000301841 -0.000127290 0.000398717 -0.000770840 -0.000393054 -0.000613794 0.000050079 -0.000006500 0.001270719 -0.000283113 -0.000040842 -0.000281894 -0.000051509 0.001248782 -0.000101944 -0.000291497 -0.000084938 -0.000260634 -0.002957021 0.000097911 -0.000130426 0.000039139 -0.003614483 -0.001217675 0.000054956 0.000094567 0.000043868 -0.001424927 0.000655577 0.000003524 -0.000001690 0.000005085 0.000000776 -0.000001640 -0.000006106 -0.000000645 0.000007941 0.000002537 0.000001125 0.000012258 -0.000001538 -0.000007734 -0.000001370 -0.000000405 -0.000014660 0.000009714 -0.000002976 -0.000002388 0.000001827 -0.000030710 -0.000011893 0.000020803 0.000006959 0.000002440 0.000030441 0.000018342 -0.000023248 -0.000011697 -0.000006835 0.000007107 0.000005835 -0.000010119 -0.000004104 0.000000128 0.000003000 -0.000000283 -0.000001370 0.000000006 -0.000000396 -0.000002456 0.000003395 -0.000001825 -0.000001388 0.000000588 0.000003414 -0.000003655 0.000003112 0.000001306 -0.000001095 -0.000003313 -0.000002166 0.000004250 0.000001513 -0.000000446 0.000007674 0.000003755 -0.000007929 -0.000003150 0.000000003 0.000003282 0.000000935 -0.000001822 -0.000000653 -0.000000398 0.000000102 -0.000000098 -0.000000240 -0.000000110 0.000000316 0.000003266 -0.000000248 -0.000000881 -0.000000072 -0.000000197 0.000004586 -0.000000066 -0.000001080 -0.000000173 -0.000000750 0.000001601 -0.000000383 -0.000000426 -0.000000000 -0.000000037 0.000000946 0.000000151 -0.000000687 -0.000000328 0.000000004 0.000012058 -0.000006013 0.000003804 0.000001378 -0.000001908 0.000004925 0.000000815 -0.000004672 -0.000001799 -0.000000845 -0.000018851 -0.000003183 0.000011912 0.000004988 0.000001597 -0.000008749 -0.000002819 0.000006723 0.000002549 0.000000485 -0.000005311 -0.000000283 0.000001945 0.000001021 0.000000337 -0.000000826 -0.000000412 0.000002429 0.000000267 -0.000000023 -0.000009080 -0.000000292 0.000004491 0.000001281 0.000001244 0.000000383 -0.000001253 0.000000310 0.000000344 0.000000004 0.000015651 0.000001188 -0.000006942 -0.000002762 -0.000001275 0.000000854 -0.000001170 0.000001116 0.000000506 -0.000000640 0.000002773 -0.000000820 -0.000000063 0.000000213 -0.000000443 -0.000001745 0.000000650 -0.000000270 -0.000000430 0.000000656 0.000114376 -0.000047885 -0.000019521 -0.000012436 -0.000001730 -0.000214380 0.000186781 -0.000104160 -0.000004943 -0.000011646 0.000075268 -0.000038534 -0.000024768 -0.000000954 0.000010345 -0.000156248 0.000267219 -0.000319787 0.000023867 0.000026278 -0.000466431 0.000155436 0.000251694 -0.000015144 -0.000039307 -0.000231536 -0.000008563 -0.000061485 0.000008121 -0.000030940 0.000015904 -0.000013509 -0.000014780 0.000009685 0.000011047 0.000082496 -0.000080862 0.000055639 0.000000270 -0.000001577 0.000018826 -0.000013199 -0.000025785 0.000008086 0.000011455 0.000064249 -0.000056664 0.000041038 -0.000006064 -0.000005377 -0.000055592 0.000057567 -0.000014330 -0.000013699 -0.000017048 0.000048289 -0.000035857 0.000027697 -0.000004983 -0.000004539 0.000006319 0.000006408 -0.000009211 -0.000002622 -0.000001377 0.000011051 0.000002427 -0.000009878 -0.000001985 -0.000000233 0.000011188 -0.000001207 -0.000007240 -0.000001978 -0.000000947 0.000006417 0.000002819 -0.000007391 -0.000001061 -0.000000446 0.000006682 0.000002431 -0.000004339 -0.000001895 -0.000001349 0.000005043 0.000000226 -0.000001872 0.000000004 0.000000933 0.000040719 -0.000038909 0.000064080 -0.000016489 -0.000021637 0.000125585 -0.000093834 0.000039628 0.000001253 0.000016425 0.000050513 0.000009592 0.000038819 -0.000012899 -0.000018950 -0.000093720 0.000066010 -0.000024242 -0.000003581 -0.000007262 -0.000004553 0.000023625 -0.000029059 -0.000003301 -0.000005586 -0.000065307 0.000052768 -0.000034025 -0.000003935 -0.000007729 -0.000005410 0.000001868 -0.000002083 0.000001335 0.000002281 -0.000008961 -0.000012317 0.000032752 -0.000000642 -0.000003907 -0.000002741 0.000011939 -0.000008442 0.000003228 0.000008246 0.000004267 0.000004101 -0.000002067 -0.000001321 -0.000002973 0.000013671 0.000000938 -0.000001314 -0.000003405 -0.000004837 -0.000001058 -0.000002598 0.000003487 0.000000119 0.000000531 0.000015543 0.000004601 0.000003194 0.000054972 0.000006911 -0.000002758 -0.000007393 -0.000005169 -0.000014516 0.000065772 -0.000007002 -0.000037930 0.000017315 0.000041330 -0.000019899 -0.000003623 -0.000004654 0.000003401 0.000019865 -0.000001815 -0.000002116 0.000004762 0.000001687 -0.000022602 -0.000060987 -0.000000977 -0.000001573 -0.000002498 0.000004113 0.000018453 -0.000001033 0.000013296 -0.000008282 -0.000040731 0.000001423 0.000004344 0.000005639 -0.000002173 0.000004106 -0.000006096 -0.000003370 -0.000001635 0.000003879 -0.000010067 -0.000021706 -0.000023152 -0.000011234 0.000002621 -0.000030740 -0.000019668 0.000000193 -0.000008756 0.000005091 0.000040113 0.000026443 0.000000417 0.000000642 -0.000001802 0.000025513 0.000022453 -0.000037784 0.000094234 -0.000068723 -0.000135595 -0.000069673 -0.000089861 -0.000187861 0.000070108 0.000030507 0.000273956 0.000011746 -0.000009494 0.000013365 0.000310457 0.000033478 0.000027747 -0.000175679 0.000075578 0.000035360 0.000027352 0.000024256 0.000049798 -0.000073693 -0.000293336 0.000080369 0.000047950 0.000064084 0.000022838 -0.000241741 -0.000051921 0.000013298 0.000015066 -0.000011729 0.000008132 0.000011691 0.000056202 -0.000034217 0.000015678 -0.000030035 -0.000059826 -0.000039415 0.000002208 -0.000000279 0.000073993 -0.000087001 0.000003553 0.000017541 0.000000033 0.000063545 0.000179090 -0.000003984 0.000035510 -0.000014707 0.000271411 -0.000441941 -0.000025931 -0.000029535 -0.000013185 -0.000085632 0.000450966 0.069463969 0.001730018 0.758321328 0.002009491 0.012807656 0.694156738 -0.004532634 -0.293390789 0.299460835 0.631434728 0.000682390 -0.000443068 0.003605803 0.001406372 0.068291732 -0.000276235 0.000896192 -0.002540841 0.000215528 -0.055783633 0.000361011 -0.001597612 -0.000585858 -0.004353000 -0.037869732 -0.000117705 -0.000252795 0.000872476 0.000589251 0.000723696 0.000319320 -0.000964732 0.000739036 0.000342497 0.000973877 -0.000610515 -0.000253110 -0.000109887 0.000734684 -0.000911910 0.000014541 -0.000189678 -0.000096729 0.000067676 -0.000007726 0.000001138 -0.000067972 -0.000110989 -0.000009675 -0.000001036 -0.000001319 0.000165422 0.000093635 -0.000004398 0.000006858 0.000019265 -0.000255196 -0.000182420 0.000082257 -0.000009452 0.000009883 -0.000228888 -0.000250288 0.000014870 -0.000005860 0.000001827 0.000084558 0.000057573 0.000012515 0.000003206 -0.000223653 -0.140301194 0.033499962 0.059421205 -0.000834541 -0.000352348 0.037792691 -0.409932429 -0.258289840 -0.002781305 0.000400783 0.060862272 -0.254017163 -0.298476074 -0.001552642 -0.000966772 -0.464694704 -0.001322998 0.234458987 0.001444686 0.001341001 -0.006116227 -0.127679047 -0.027992906 -0.000646388 0.000961587 0.230546800 -0.030935033 -0.244143543 -0.001254389 0.000002193 0.000015928 0.000022569 0.000017815 -0.000001113 0.000001916 -0.000047662 -0.000050329 -0.000000760 0.000000637 -0.000001194 0.000058257 0.000061976 0.000003517 -0.000000589 -0.000005266 -0.000067065 -0.000088381 -0.000041851 0.000000796 0.000004931 -0.000161063 -0.000171086 -0.000018417 0.000004689 -0.000006179 0.000204187 0.000224338 0.000025952 -0.000007356 -0.000004632 0.000044207 0.000042014 -0.000013138 -0.000001373 -0.000000062 0.000016540 0.000013992 0.000000905 0.000001061 -0.000002168 -0.000007454 -0.000015350 -0.000013098 0.000000412 0.000002024 -0.000000862 0.000010124 0.000015651 -0.000002159 0.000001730 -0.000021379 -0.000024799 0.000001839 0.000001076 -0.000003192 0.000052120 0.000046273 -0.000009410 0.000000199 -0.000000563 0.000023285 0.000025288 0.000002619 -0.000000223 -0.000000140 -0.000006696 -0.000002674 0.000001119 -0.000001146 0.000000363 0.000021549 0.000027003 0.000007724 -0.000000595 0.000000664 0.000030528 0.000035236 0.000009897 -0.000000175 0.000000258 0.000005067 0.000011449 0.000005977 -0.000001299 -0.000000213 0.000002325 0.000005132 0.000001443 -0.000000803 0.000003612 0.000030023 0.000042449 0.000027368 -0.000001955 -0.000001401 0.000050525 0.000044708 -0.000002718 0.000002644 0.000003278 -0.000117128 -0.000131212 -0.000011613 0.000004733 0.000002144 -0.000055178 -0.000055832 0.000000859 -0.000000217 0.000000550 -0.000022679 -0.000032612 -0.000007452 0.000003067 0.000000236 0.000006776 0.000003297 -0.000001172 0.000002342 -0.000000101 -0.000044382 -0.000054268 -0.000013923 0.000002894 0.000000284 -0.000021227 -0.000012961 0.000004386 -0.000004574 -0.000000997 0.000072616 0.000084324 0.000014772 -0.000003947 0.000000948 -0.000007531 -0.000004779 0.000005035 -0.000000600 0.000000707 0.000005166 0.000016161 0.000011394 -0.000002641 -0.000000730 -0.000010898 -0.000012233 -0.000005149 -0.000000586 -0.000021645 0.000183931 0.000178898 0.000030946 -0.000000745 0.000012190 0.000203602 0.000290856 -0.000079976 -0.000022765 -0.000010215 0.000019727 0.000004871 0.000021500 -0.000000793 0.000010453 -0.000159375 -0.000058687 -0.000137372 -0.000025734 0.000031428 0.000197640 0.000253997 -0.000023324 -0.000043391 0.000042216 0.000357998 0.000394109 0.000007023 0.000070018 0.000002406 -0.000140421 -0.000151352 0.000001160 0.000007423 0.000002577 0.000026789 -0.000011283 0.000048986 0.000005501 -0.000004098 -0.000147556 -0.000167977 -0.000023508 0.000003644 -0.000003401 0.000051419 0.000033122 0.000035883 -0.000005225 0.000001088 0.000244581 0.000270651 -0.000007389 -0.000012451 -0.000004153 0.000043845 0.000020949 0.000016251 -0.000001541 -0.000002195 0.000050094 0.000047810 -0.000003511 -0.000002027 -0.000001672 0.000040982 0.000047521 0.000002183 -0.000003290 -0.000000020 0.000050858 0.000059185 0.000010885 -0.000003229 -0.000001358 0.000035451 0.000031754 -0.000000832 -0.000000501 -0.000000499 0.000048831 0.000050574 0.000005729 -0.000001061 0.000000626 0.000020329 0.000025596 0.000010010 -0.000000473 0.000004872 0.000230758 0.000216249 0.000052986 -0.000020865 -0.000021643 -0.000185901 -0.000231496 0.000026697 0.000000193 0.000003161 0.000214150 0.000196675 0.000020195 -0.000009843 0.000008528 0.000177608 0.000223789 -0.000005675 -0.000002224 0.000001383 0.000070332 0.000073947 -0.000004881 -0.000002943 0.000003031 0.000108199 0.000126372 -0.000030376 -0.000009325 -0.000002945 -0.000040301 -0.000046448 -0.000016920 0.000000806 0.000003043 -0.000048960 -0.000051509 -0.000000652 0.000001248 0.000000802 -0.000024920 -0.000008261 0.000011030 0.000002024 0.000000082 0.000020282 0.000013637 -0.000005219 -0.000000939 0.000000901 0.000083831 0.000080261 0.000011433 -0.000003155 0.000001121 -0.000004476 0.000001150 0.000007976 -0.000001446 -0.000061828 0.000205581 -0.000126388 -0.000175801 -0.000003379 -0.000007082 0.000821255 -0.000056989 -0.000509928 0.000020544 0.000066049 0.000182684 0.000222225 0.000056114 0.000012698 0.000017158 -0.000005159 0.000038310 0.000088911 0.000002348 0.000022756 -0.000677432 0.000166659 0.000450218 -0.000010990 -0.000003189 0.000374728 -0.000137019 -0.000262084 0.000007469 -0.000003247 -0.000087329 -0.000042821 -0.000009031 -0.000002293 -0.000019792 -0.000120625 -0.000007730 0.000054735 -0.000004417 0.000023181 -0.000250118 0.000068833 0.000197068 -0.000003321 0.000071778 -0.000329107 0.000146417 0.000258139 0.000001739 -0.000010095 0.000224613 -0.000031262 -0.000107213 0.000003787 -0.000013342 0.000167655 -0.000043302 -0.000117166 0.000001550 0.000115544 -0.001001543 -0.000313836 0.000164593 -0.000012183 0.000304605 0.001214499 -0.000477458 -0.000906022 0.000044849 -0.000320072 0.000698067 0.000091772 -0.000222088 0.000012284 -0.000212667 0.000387455 0.000050972 -0.000206814 0.000002620 -0.000157130 -0.000137970 -0.000447171 -0.000100257 -0.000039554 -0.000614337 -0.000236825 -0.000186691 0.000111352 -0.000016661 -0.000072818 0.000127443 0.000088756 -0.000077932 0.000004145 -0.000088195 -0.000143199 0.000154449 0.000155497 -0.000006498 0.000096908 -0.000871881 0.000039781 0.000499099 -0.000006528 -0.000152654 0.001469203 0.000160990 -0.000245292 0.000021790 0.000356977 -0.000100857 0.000654847 0.000244093 0.000029996 -0.000394280 0.001400148 -0.000062630 -0.001343776 0.000007712 0.286131627 0.136165143 0.100349866 0.000504600 -0.000860935 0.327998289 -0.000003653 0.001879893 -0.046601890 0.062603729 0.002052420 -0.003456933 -0.095796975 0.028155422 0.062319786 -0.000002191 0.000004250 -0.000000043 -0.000010524 -0.000017701 -0.000003620 0.000008799 -0.000000877 -0.000006686 -0.000001892 -0.000002045 0.000010667 0.000001444 0.000006649 0.000027478 -0.000005602 0.000015705 -0.000000397 -0.000016061 -0.000016608 -0.000006480 0.000015488 -0.000001969 -0.000019994 -0.000016712 -0.000001434 0.000007922 0.000000996 0.000003110 0.000015622 -0.003629744 -0.002018333 -0.000012551 0.000090314 0.000019790 -0.000601081 -0.000035146 -0.000227188 -0.000065292 -0.000002866 0.000801843 0.000666386 -0.000099457 -0.000041939 -0.000020172 -0.000128638 0.000597716 -0.000472565 -0.000398609 -0.000237530 0.000366578 0.000081029 -0.000328401 -0.000389590 -0.000043464 0.000079893 0.000141239 0.000035112 0.000234279 -0.000263259 -0.000001020 0.000003162 -0.000003444 -0.000000491 0.000009015 0.000000436 0.000001581 0.000000675 -0.000006248 -0.000001644 0.000000293 -0.000000857 -0.000002856 0.000010161 0.000008207 0.000002794 -0.000009970 0.000007485 0.000001423 -0.000046359 0.000003934 0.000001677 -0.000002964 -0.000021033 -0.000015185 -0.000005209 -0.000004160 0.000003562 0.000034239 0.000022685 -0.000000017 -0.000006059 0.000002269 0.000011826 -0.000007532 0.000000023 0.000000536 0.000000574 0.000000477 0.000002416 0.000000616 -0.000002952 0.000001105 0.000001218 -0.000007965 -0.000001798 0.000003686 -0.000002990 -0.000001429 0.000011408 -0.000000083 0.000002287 -0.000000639 -0.000005859 0.000001975 0.000000463 -0.000003956 0.000001263 0.000007518 -0.000000777 -0.000000127 -0.000000232 0.000000432 0.000003358 0.000002793 -0.000000363 -0.000000430 -0.000000567 0.000000244 -0.000000806 -0.000000174 0.000000484 0.000000323 0.000003888 0.000002883 -0.000000647 0.000001269 0.000001158 0.000004476 0.000005104 -0.000000557 0.000000411 -0.000000623 0.000001300 0.000001442 -0.000000370 -0.000000215 0.000000069 0.000001415 -0.000000264 -0.000002940 0.000005976 -0.000003718 -0.000008777 0.000018908 0.000001409 -0.000001188 0.000006391 0.000012254 0.000003475 0.000002130 0.000003933 -0.000000237 -0.000026421 -0.000002080 0.000000248 0.000001785 -0.000003636 -0.000007061 -0.000006099 0.000001819 0.000000320 0.000001598 -0.000003199 -0.000000529 0.000000659 0.000000347 0.000004909 0.000003560 -0.000000539 0.000002469 -0.000001095 0.000001831 -0.000008280 -0.000008770 -0.000002235 0.000000162 -0.000008922 -0.000010025 -0.000004477 -0.000003075 -0.000000444 0.000001629 0.000006433 0.000008881 -0.000001019 0.000001855 -0.000000047 -0.000003015 0.000005174 -0.000001577 0.000001687 -0.000001672 0.000000788 0.000004531 0.000000077 -0.000001429 -0.000000684 -0.000001200 -0.000003819 -0.000000608 0.000002768 -0.000003539 -0.000010162 0.000056212 -0.000023062 -0.000002460 -0.000006325 0.000139727 -0.000073793 0.000000374 0.000003655 -0.000016750 -0.000022783 -0.000000351 0.000017234 -0.000047848 -0.000074560 0.000195028 -0.000123428 -0.000050943 0.000009810 0.000037112 0.000117926 0.000147373 0.000052287 0.000000194 0.000047131 0.000007696 0.000049117 0.000008562 -0.000000372 0.000009012 -0.000061340 -0.000000640 0.000010725 -0.000006744 -0.000009015 -0.000048555 0.000035457 0.000006072 -0.000002262 -0.000015010 -0.000022401 -0.000019798 -0.000001193 -0.000004422 -0.000005018 -0.000032933 -0.000010314 -0.000014429 0.000000687 0.000001483 0.000074807 -0.000008661 0.000001379 -0.000003734 -0.000001894 -0.000027296 -0.000006777 -0.000001069 -0.000001943 -0.000000505 0.000005977 -0.000003435 -0.000001663 -0.000002960 -0.000000361 0.000003475 -0.000006560 -0.000002418 -0.000001309 -0.000000299 0.000004051 -0.000001175 -0.000000540 -0.000000499 -0.000001120 0.000005741 0.000000583 -0.000001344 -0.000000297 0.000000251 0.000006969 0.000005420 -0.000000829 0.000000181 0.000002374 -0.000002783 0.000002924 -0.000026262 0.000004115 0.000014606 -0.000001796 0.000039649 0.000002957 0.000003678 0.000000895 -0.000113515 -0.000010095 -0.000010796 0.000001900 0.000011943 0.000013773 0.000016548 -0.000004619 -0.000001775 0.000000180 0.000067828 -0.000007999 -0.000007091 0.000005950 0.000009417 0.000028176 0.000044606 -0.000006472 -0.000004227 -0.000008733 0.000068452 -0.000015955 0.000003193 -0.000002153 -0.000004829 -0.000000170 -0.000010432 0.000000143 0.000001959 0.000001427 0.000001285 0.000010277 0.000000506 0.000001021 0.000002000 -0.000011581 -0.000003661 -0.000000784 -0.000000174 0.000000734 0.000002843 0.000000583 -0.000003862 0.000000461 0.000001912 0.000006869 0.000006334 -0.000002363 0.000001047 0.000000909 -0.000003224 0.000001783 -0.000004439 0.000015793 -0.000002413 -0.000001180 0.000004205 0.000002220 -0.000003403 -0.000005795 -0.000000483 0.000002720 0.000003364 -0.000005492 0.000001496 -0.000002498 0.000000645 -0.000001116 0.000005390 0.000000323 -0.000001977 0.000000676 0.000002041 -0.000012995 0.000005867 0.000002961 -0.000005342 -0.000000575 0.000005050 -0.000003327 -0.000002561 0.000001668 -0.000000061 -0.000002938 -0.000000171 0.000001554 -0.000001086 0.000000262 -0.000002245 0.000000313 0.000001812 -0.000000686 -0.000000281 0.000000258 0.000002596 -0.000000289 -0.000000479 0.000002902 -0.000014015 0.000004437 -0.000000847 -0.000006737 -0.000002064 0.000008426 -0.000001608 -0.000002249 0.000002996 0.000000151 0.000001686 -0.000001943 0.000000001 0.000000301 -0.000000293 -0.000005251 -0.000000091 0.000005912 -0.000002420 -0.000001838 0.000016432 -0.000007582 -0.000023045 -0.000007691 0.000011751 -0.000007003 -0.000005496 -0.000001175 0.000008403 0.000006439 -0.000006011 0.000002140 -0.000007220 -0.000002034 -0.000004888 0.000020734 -0.000004726 0.000009403 0.000015035 0.000000668 0.000019555 -0.000002528 0.000005797 0.000012237 0.000002891 -0.000004711 -0.000003507 0.000006398 0.000025149 0.000005284 -0.000019476 0.000001676 0.000005407 0.000008728 -0.000003565 -0.000015774 0.000004603 0.000000875 -0.000021047 -0.000004887 0.000030919 -0.000000797 -0.000007238 -0.000001557 0.000002127 -0.000031547 0.000005544 0.000000578 -0.000017053 0.000002131 0.000025066 -0.000009758 -0.000005732 0.000005987 0.115588491 -0.060260304 0.340438158 -0.168521838 0.292172302 0.476921630 0.038241637 0.009970256 -0.006301193 0.128550628 -0.004197973 -0.086134419 -0.063983589 0.202711315 0.683358116 -0.016166042 -0.090895903 -0.003709436 -0.019166389 0.106252814 0.000051456 0.000011616 -0.000056891 0.000060611 0.000051737 0.000030797 0.000071028 -0.000031214 0.000084210 0.000140724 -0.000028379 0.000010614 -0.000012089 -0.000033569 0.000007382 0.000119769 0.000032010 -0.000104175 0.000153012 0.000125326 0.000039029 0.000041759 -0.000028907 0.000074651 0.000093206 -0.000076190 -0.000015703 0.000022889 -0.000106435 -0.000065857 -0.000038502 0.000014489 0.000098746 -0.000034423 -0.000044830 -0.000059210 0.000014458 0.000095137 -0.000065761 -0.000094889 0.000002693 -0.000009571 0.000020855 0.000005541 -0.000032049 -0.000046561 0.000013384 0.000021654 -0.000049668 -0.000022677 -0.000076459 -0.000009329 0.000086028 -0.000083340 -0.000081097 0.000055471 0.000006448 -0.000048140 0.000056568 0.000042055 0.000089469 -0.000001371 -0.000138812 0.000094892 0.000104763 -0.000021896 0.000007730 0.000043804 -0.000020265 -0.000023957 0.000058685 0.000009517 -0.000099263 0.000062062 0.000082707 -0.000002086 -0.000002338 0.000014567 -0.000003088 -0.000011007 -0.000029002 0.000003858 0.000040072 -0.000027619 -0.000017416 0.000068818 0.000004210 -0.000084501 0.000075422 0.000078420 0.000014268 0.000003483 -0.000008811 0.000016843 0.000015144 0.000010573 -0.000006116 -0.000020690 0.000006892 -0.000000952 -0.000015547 -0.000005480 0.000023988 -0.000018323 -0.000027269 -0.000020350 -0.000002317 0.000033072 -0.000021105 -0.000025017 -0.000007482 -0.000005045 0.000010421 -0.000009909 -0.000016303 0.000012517 -0.000001813 -0.000021787 0.000012049 0.000012415 -0.000015657 -0.000004769 0.000045572 -0.000016840 -0.000034070 0.000033005 0.000004986 -0.000037097 0.000038256 0.000040350 -0.000062681 -0.000002786 0.000073588 -0.000064255 -0.000054747 -0.000067296 -0.000003665 0.000081547 -0.000071824 -0.000067812 -0.000033247 0.000001111 0.000047552 -0.000032812 -0.000032955 0.000025656 0.000003813 -0.000039149 0.000027267 0.000035089 0.000000409 0.000001872 -0.000003463 0.000000669 0.000003088 -0.000008618 -0.000003692 0.000006875 -0.000011939 -0.000014573 0.000029755 -0.000000214 -0.000033536 0.000031084 0.000028506 -0.000009182 -0.000000871 0.000012708 -0.000009573 -0.000009978 -0.000011026 -0.000004354 0.000014415 -0.000013748 -0.000018910 0.000016814 0.000001570 -0.000023909 0.000016796 0.000017389 0.000071828 0.000009659 -0.000081771 0.000081674 0.000082533 0.000072070 -0.000005725 -0.000110805 0.000066699 0.000058924 0.000054567 0.000003093 -0.000066336 0.000059206 0.000059223 0.000020869 0.000000061 -0.000029958 0.000019375 0.000019771 -0.000003165 0.000005466 0.000010272 0.000002971 0.000007024 0.000015622 0.000005626 -0.000014530 0.000020236 0.000021274 -0.000030928 -0.000010034 0.000029630 -0.000039772 -0.000044316 -0.000030994 0.000003467 0.000050470 -0.000027649 -0.000024538 -0.000036409 0.000004284 0.000037899 -0.000035192 -0.000027827 0.000001969 -0.000005548 -0.000006080 -0.000001620 -0.000005920 0.000018163 0.000006008 -0.000020464 0.000024664 0.000026525 -0.000007068 0.000006389 0.000006266 -0.000002371 0.000002868 0.000003993 0.000009431 -0.000004357 0.000010952 0.000017163 0.000037336 -0.000002249 -0.000053172 0.000035977 0.000032399 0.000016797 -0.000006325 -0.000021433 0.000012990 0.000007109 -0.000008156 0.000005095 0.000014063 -0.000004017 0.000000141 0.000001247 0.000004869 0.000005739 0.000004847 0.000007299 -0.000000090 -0.000005259 0.000001129 -0.000003607 -0.000007942 0.000007461 -0.000000519 0.000002275 0.000008793 0.000005902 -0.000018275 -0.000004198 0.000012703 -0.000023743 -0.000024128 0.000001834 0.000005451 0.000003766 0.000007311 0.000010299 0.000019754 0.000000556 -0.000017685 0.000021197 0.000018388 0.000003771 0.000011108 0.000005743 0.000012902 0.000019706 0.000006991 0.000006177 -0.000005385 0.000012607 0.000016385 0.000007506 0.000003217 -0.000011914 0.000009368 0.000011609 -0.000005400 -0.000001000 0.000004391 -0.000006499 -0.000006184 0.000012880 -0.000002189 -0.000014842 0.000010615 0.000007365 0.000001366 0.000002438 -0.000003648 0.000003267 0.000005462 -0.000011699 0.000000325 0.000019917 -0.000010561 -0.000010184 0.000007462 -0.000004041 -0.000010259 0.000004313 0.000000656 0.000004272 0.000005063 0.000007347 0.000011991 0.000013451 0.000063526 -0.000013746 -0.000037624 0.000063036 0.000012891 -0.000014319 0.000005424 0.000012589 -0.000010453 -0.000006214 -0.000006285 -0.000002217 0.000005151 -0.000009603 -0.000007906 -0.000023665 -0.000010126 0.000006523 -0.000039247 -0.000026935 -0.000004551 0.000011555 0.000005149 0.000005800 0.000015459 0.000039029 0.000009645 -0.000024222 0.000049406 0.000027393 -0.000002001 -0.000013882 -0.000011175 -0.000019705 -0.000020378 0.000005295 -0.000004135 0.000003599 0.000004134 -0.000005090 -0.000036807 -0.000006589 0.000010690 -0.000052601 -0.000029703 0.000008543 0.000001021 0.000000772 0.000010540 0.000005297 -0.000010686 -0.000007916 -0.000005071 -0.000022943 -0.000015248 -0.000029411 0.000029548 0.000027063 0.000000849 0.000033203 0.000079477 0.000027173 -0.000050805 0.000115380 0.000069822 -0.000012422 0.000008759 0.000008986 -0.000005548 -0.000000066 0.000010852 -0.000022785 -0.000007989 -0.000008459 -0.000027215 0.000027475 0.000006553 -0.000009312 0.000036671 0.000027544 -0.000042356 -0.000037258 0.000017031 -0.000085218 -0.000065148 -0.000055343 -0.000011491 0.000048053 -0.000068203 -0.000049863 -0.000016930 -0.000045535 0.000004870 -0.000063807 -0.000072698 0.000042309 -0.000017817 -0.000038419 0.000031703 0.000012507 -0.000009389 0.000035574 0.000017795 0.000023926 0.000039181 -0.000014713 -0.000003926 0.000001935 -0.000022134 -0.000016383 -0.000006571 0.000001829 0.000004758 -0.000006892 0.000001204 0.131488129 -0.000031120 0.147117418 -0.000022973 -0.063857623 0.454947817 -0.000015707 -0.112450115 0.340945584 0.345745358 -0.000051901 -0.012866038 0.042195171 0.055744373 0.534209718 -0.000016933 0.065235758 0.006170923 -0.054775580 -0.016013896 0.000001585 0.071811974 -0.041649395 -0.047150765 -0.320805836 0.000039765 -0.000005827 -0.000013458 -0.000012819 -0.000007242 0.000017451 0.000011956 0.000026162 0.000005456 0.000026349 -0.000004339 -0.000015373 -0.000033415 -0.000007602 -0.000032753 0.000015679 0.000023046 0.000049959 0.000033661 0.000034782 0.000047368 0.000041111 0.000092814 0.000029522 0.000086146 -0.000030008 -0.000049614 -0.000120523 -0.000038826 -0.000108970 -0.000068186 -0.000007726 -0.000021576 0.000004386 -0.000024489 0.000015634 -0.000005297 -0.000006242 -0.000002049 -0.000009975 -0.000047923 0.000003605 0.000009336 0.000009353 0.000003132 0.000005400 -0.000000296 -0.000006718 -0.000010175 0.000002802 0.000022642 0.000004013 0.000013940 0.000000931 0.000011184 -0.000043574 -0.000012034 -0.000023749 0.000001344 -0.000030074 -0.000005344 -0.000005986 -0.000013240 -0.000003796 -0.000012787 -0.000009414 0.000002694 0.000000285 -0.000000226 0.000004871 0.000013162 -0.000006137 -0.000015243 -0.000007157 -0.000011222 0.000017202 -0.000009066 -0.000018954 -0.000009472 -0.000016411 0.000006249 -0.000001019 -0.000007341 -0.000004607 -0.000001369 -0.000010090 -0.000000032 -0.000003222 -0.000001365 -0.000000556 0.000019178 -0.000009948 -0.000024868 -0.000021128 -0.000013338 -0.000019948 -0.000014765 -0.000021753 -0.000002393 -0.000031171 0.000041508 0.000027559 0.000070877 0.000019221 0.000062294 0.000045356 0.000013604 0.000028903 0.000004788 0.000031134 0.000023080 0.000003916 0.000018376 0.000007567 0.000009778 -0.000018964 -0.000002702 0.000000206 0.000000621 -0.000005411 -0.000002599 0.000011173 0.000029959 0.000014121 0.000022205 0.000003573 0.000008340 0.000004758 -0.000001726 0.000016065 -0.000015559 -0.000017063 -0.000046433 -0.000017668 -0.000036631 0.000006492 0.000001649 0.000002299 -0.000002856 0.000004919 0.000007721 -0.000000826 -0.000010222 -0.000008576 -0.000000255 -0.000012639 0.000004074 0.000005956 0.000004305 0.000006417 -0.000039853 -0.000057365 -0.000094752 -0.000022689 -0.000097848 -0.000053656 -0.000040599 -0.000142922 -0.000006599 -0.000100677 -0.000031444 -0.000016347 -0.000012789 -0.000004661 -0.000006177 -0.000014976 0.000033423 0.000031403 0.000032956 0.000067469 0.000006156 -0.000018150 -0.000084504 -0.000021383 -0.000131211 -0.000007852 -0.000020429 -0.000181926 -0.000053915 -0.000155761 0.000015421 0.000039189 0.000073501 0.000016455 0.000081218 0.000024593 0.000000639 0.000007119 -0.000019708 -0.000016550 0.000017053 0.000032071 0.000084356 0.000030311 0.000076846 -0.000002326 -0.000010705 -0.000018555 -0.000016143 -0.000024091 -0.000009472 -0.000058484 -0.000132784 -0.000030858 -0.000133034 0.000001387 -0.000007960 -0.000008978 -0.000005082 -0.000022438 -0.000003941 -0.000011151 -0.000023754 -0.000002963 -0.000027525 -0.000025935 -0.000007713 -0.000026238 -0.000005903 -0.000019957 -0.000008449 -0.000011711 -0.000033563 -0.000012794 -0.000024828 0.000006564 -0.000010143 -0.000016413 -0.000003143 -0.000020392 0.000002277 -0.000012584 -0.000026620 -0.000008799 -0.000026540 0.000001781 -0.000004809 -0.000015256 -0.000008582 -0.000009134 0.000002495 -0.000059951 -0.000112287 -0.000048494 -0.000126114 0.000005236 0.000032837 0.000107091 0.000029902 0.000105607 0.000001824 -0.000045913 -0.000092280 -0.000029857 -0.000119757 -0.000007658 -0.000031985 -0.000109929 -0.000031257 -0.000092299 0.000002168 -0.000021024 -0.000036596 -0.000008819 -0.000043863 -0.000002698 -0.000025059 -0.000058787 -0.000005345 -0.000063966 -0.000006852 0.000009805 0.000025272 0.000015795 0.000019655 0.000001910 0.000013314 0.000030460 0.000006857 0.000025008 -0.000007204 0.000007037 -0.000002059 -0.000006729 0.000019472 -0.000002293 -0.000004180 -0.000004855 0.000001520 -0.000012573 0.000010649 -0.000021618 -0.000041340 -0.000015677 -0.000046078 -0.000004492 0.000000548 -0.000002707 -0.000004939 0.000003971 0.000007916 -0.000073509 0.000145417 0.000101474 -0.000167065 -0.000012624 -0.000257598 0.000218308 0.000259338 -0.000530832 0.000004266 -0.000043362 -0.000119264 -0.000012947 -0.000110606 0.000002820 -0.000021503 -0.000023477 -0.000019937 -0.000068648 0.000000522 0.000231742 -0.000287508 -0.000261185 0.000516319 0.000001380 -0.000107429 0.000159322 0.000164879 -0.000317042 -0.000013581 0.000029240 0.000006442 -0.000016462 0.000083966 -0.000006705 0.000038773 -0.000025216 -0.000028746 0.000072979 0.000004176 0.000075972 -0.000114847 -0.000118427 0.000179966 0.000000115 0.000115715 -0.000189661 -0.000151842 0.000255638 0.000001245 -0.000082745 0.000083639 0.000083777 -0.000210383 -0.000003939 -0.000058261 0.000082181 0.000086892 -0.000164297 0.000011396 0.000271418 -0.000053707 -0.000208633 0.000619310 -0.000026855 -0.000484639 0.000591375 0.000396124 -0.000780943 0.000003226 -0.000195404 0.000099996 0.000130137 -0.000485906 -0.000002558 -0.000115251 0.000027150 0.000102999 -0.000256402 -0.000001666 0.000031156 0.000281211 0.000132702 0.000044779 0.000008797 0.000045294 0.000080921 0.000014588 0.000100366 0.000024144 -0.000029488 -0.000032105 0.000024355 -0.000072233 0.000002553 0.000058531 -0.000167479 -0.000082292 0.000046400 -0.000014678 0.000264719 -0.000225668 -0.000247305 0.000463047 0.000007607 -0.000474093 0.000321675 0.000352131 -0.001160742 -0.000001508 0.000173542 -0.000515695 -0.000248122 0.000181543 0.000001947 -0.000333422 0.000335691 0.000371372 -0.000946834 0.119936599 0.070555037 0.279844928 -0.000005409 -0.000008974 0.687206280 0.000016779 -0.000010282 0.074257294 0.304543333 -0.000020465 0.000009141 0.017425358 -0.219175024 0.573114521 0.000026043 0.000013241 -0.211961735 0.014361708 -0.069298037 0.000054780 -0.000022630 0.017458005 -0.110683473 0.055631338 -0.000069753 0.000028412 -0.065324171 0.056289177 -0.198423291 -0.000015441 0.000019850 -0.296299365 -0.046776415 0.019733727 -0.000004413 0.000002396 -0.031590565 -0.086212865 0.018910391 0.000003677 0.000007288 -0.009240739 0.015138057 -0.103407346 -0.000001413 -0.000009128 0.000972630 -0.016351968 0.028202037 0.000008709 -0.000006954 -0.036938501 -0.003801244 0.012938980 -0.000016576 0.000016975 0.066461147 0.020009547 -0.006868534 -0.000007981 0.000003418 -0.014684859 0.008862763 -0.021791478 0.000000793 -0.000001059 -0.004533639 0.005099742 -0.004264646 -0.000008195 -0.000000366 0.004429795 -0.000279256 0.005476515 -0.000010485 -0.000000259 0.001613808 -0.001491205 0.000672494 -0.000003278 -0.000001997 -0.001018035 0.005455562 0.006140245 -0.000001543 0.000000317 -0.000047514 0.005855187 -0.002152808 -0.000010798 -0.000011443 0.051976997 0.015697086 -0.013063972 -0.000015511 0.000011558 0.022609746 0.005593625 0.014758377 0.000041566 -0.000019609 -0.029353484 0.011189822 -0.023868402 0.000018519 -0.000013096 -0.055019494 -0.009498989 0.002067417 0.000009326 -0.000002032 0.003497938 -0.005581094 -0.003994957 -0.000000786 0.000002128 -0.020420555 -0.008016473 -0.000626290 0.000015963 -0.000001320 -0.000178490 -0.001626391 0.001537646 0.000005562 -0.000006003 -0.002332306 0.002750259 0.003787797 -0.000025444 0.000007478 0.002642305 0.003647093 -0.001685961 0.000002400 -0.000004586 -0.000932114 -0.000004127 -0.000177710 -0.000003811 -0.000004911 0.000043875 -0.000418380 -0.000348079 0.000003239 0.000001598 -0.000528430 -0.000676484 0.000501213 -0.000071707 0.000022355 0.000233717 -0.000097596 -0.000653660 -0.000077367 0.000055156 -0.000375311 -0.000339506 0.000246564 -0.000015399 -0.000005200 0.000038553 0.000042447 -0.000915470 0.000027132 0.000013101 -0.000150989 -0.000303841 0.000370675 -0.000021144 0.000053693 0.000106187 -0.000084343 0.000299654 -0.000060490 0.000062360 -0.000129018 -0.000139604 0.000063528 0.000046013 -0.000022865 0.000193541 -0.000155628 -0.000232677 0.000011784 -0.000005255 -0.000557264 0.000442549 -0.000888731 0.000044465 -0.000014371 -0.000501265 -0.000000189 -0.000346790 -0.000009679 -0.000000931 0.000157779 0.000089930 0.000167930 -0.000074792 0.000041125 0.000199907 -0.000110391 0.000212202 -0.000005378 0.000006555 0.000048790 0.000094449 0.000084640 -0.000014225 0.000012495 0.000325630 0.000056082 0.000220440 -0.000014784 0.000008921 -0.000014526 0.000001868 0.000105210 -0.000018234 0.000004356 0.000338899 -0.000006591 0.000345088 -0.000010790 0.000006639 0.000033028 -0.000002588 0.000025052 -0.000015602 0.000006271 -0.000007573 -0.000016513 0.000008200 -0.000007758 -0.000001371 -0.000054247 0.000001932 -0.000048279 -0.000061521 0.000019175 0.000015533 0.000039578 -0.000046294 0.000045010 -0.000037083 -0.000176458 0.000160591 -0.000221366 -0.000047186 0.000033079 -0.000002368 -0.000048519 0.000017561 -0.000053155 0.000030754 0.000079376 -0.000124177 0.000117018 -0.000021585 0.000012913 -0.000011314 -0.000062869 -0.000018666 -0.000031816 0.000029012 0.000173244 -0.000089187 0.000185983 0.000011879 0.000001615 0.000003242 0.000016461 -0.000000774 0.000019049 -0.000008064 0.000001026 -0.000001204 0.000017894 0.000000075 -0.000009177 -0.000001182 -0.000010763 -0.000007498 -0.000002518 0.000006199 0.000016153 -0.000001475 0.000025268 -0.000022774 0.000008645 -0.000008051 -0.000004904 -0.000003836 -0.000000860 -0.000004866 0.000031829 0.000000455 0.000029443 0.000060422 0.000128784 0.000001533 0.000001783 -0.000001528 -0.000183402 0.000545844 0.000000238 0.000002791 -0.000002681 -0.000129088 0.000046621 0.000004337 -0.000001432 0.000002962 -0.000000285 -0.000127272 0.000001205 -0.000000500 0.000000870 0.000012524 -0.000421226 -0.000000616 -0.000002066 0.000001912 -0.000005346 0.000261899 -0.000000634 0.000000672 -0.000001037 0.000010102 0.000001227 -0.000002290 0.000000805 -0.000001262 0.000044264 -0.000074166 -0.000001529 -0.000000256 -0.000000413 0.000007813 -0.000183461 0.000001849 -0.000000560 0.000001295 -0.000048855 -0.000198336 -0.000001449 -0.000002866 0.000002481 0.000026039 0.000068971 0.000001784 0.000000740 -0.000000024 0.000030729 0.000095340 -0.000001648 -0.000000102 -0.000000743 0.000025803 -0.000570082 -0.000002053 0.000000839 -0.000001613 -0.000131856 0.000734013 -0.000007798 0.000000746 -0.000003035 -0.000135029 0.000036177 0.000005119 -0.000000461 0.000001424 -0.000002988 0.000208308 0.000004065 -0.000000248 0.000001732 0.000262009 0.000008204 0.000001175 0.000004829 -0.000005199 0.000150788 -0.000114356 0.000003364 0.000000184 0.000000602 -0.000025828 0.000069864 0.000017578 0.000000944 0.000003157 -0.000028289 -0.000195108 0.000010138 0.000000085 0.000003647 -0.000009274 -0.000581364 -0.000014381 0.000000744 -0.000004625 -0.000215669 0.000075558 -0.000000051 -0.000000638 0.000000430 -0.000478514 -0.000279688 -0.000001882 -0.000003338 0.000003295 -0.000114369 -0.000110899 0.000000986 0.000001684 -0.000001419 0.667744760 0.057501181 0.302969985 0.018085792 -0.212386597 0.568831673 -0.021700616 0.016887502 -0.042661205 0.667172592 0.009788491 0.020211202 -0.020443050 0.058167391 0.293862417 -0.024467285 -0.018014675 0.035222659 0.047383996 -0.263915790 0.004662250 0.008203882 -0.011616684 -0.158971944 -0.065402177 -0.002766040 -0.018400171 0.019007059 -0.033902662 -0.148555787 0.010227610 0.021976797 -0.047837897 0.037062124 0.135798947 -0.004024863 -0.002596622 0.002125676 -0.182963180 0.047890271 -0.002114400 0.003728894 0.001724616 0.047567210 -0.064224149 0.000754785 0.002057512 0.001418944 -0.131112658 0.061421137 0.000735344 0.000332723 -0.000270745 -0.004587428 -0.000404536 0.000045831 -0.000577867 0.000054259 -0.015417408 0.001301041 0.000055909 0.000231578 -0.000982228 0.026482321 0.005386410 -0.121453157 -0.016521653 0.016471396 -0.037089963 -0.020294460 -0.028404543 -0.120344221 0.086905135 -0.018354545 -0.016009368 0.045889452 0.093874227 -0.240067712 0.024811977 0.012829762 -0.027859195 -0.038552083 0.063978450 0.059470310 0.030287753 -0.018111821 0.002757392 0.005564548 0.006279824 0.000202095 0.025427320 -0.000424776 0.016851629 0.001710360 0.027775688 0.010264899 -0.002683546 0.007739025 -0.000248587 -0.000370582 0.009714858 -0.000404025 0.010141758 -0.000064647 -0.000507117 -0.018181346 0.005324345 -0.012301325 0.001057543 -0.000082349 -0.005312415 -0.001680489 -0.000883718 -0.002483269 0.000455972 -0.002279092 0.006968233 0.003133511 0.000894059 0.004344325 -0.000518310 0.002808201 0.003155900 -0.004018399 0.002378869 0.000579229 -0.000620596 -0.000134659 -0.000062457 -0.000108058 -0.001954810 -0.001103814 -0.001337465 0.000130081 0.000147943 0.001983934 0.000864717 -0.000311241 -0.000232652 -0.000195325 -0.000405172 -0.000079275 -0.000149954 0.000279649 0.000171222 -0.000569252 -0.000008421 -0.000119572 -0.000072647 0.000011185 -0.000367933 0.000092682 -0.000706992 0.000098735 0.000035206 -0.000491304 0.001447939 0.000194137 -0.000295784 -0.000108928 0.001553760 -0.002211596 0.000580625 0.000194253 0.000028425 0.000578741 -0.000561513 0.000294176 0.000404158 0.000242196 -0.000042317 0.000277901 0.000336152 -0.000022334 -0.000051397 -0.000419101 -0.000178204 -0.000280897 -0.000147211 -0.000006907 0.000304478 0.000210473 0.000283868 0.000102763 -0.000019591 -0.000253527 0.002267302 0.000165589 -0.000204598 -0.000148844 0.001531282 -0.002482332 -0.000415068 0.000153835 0.000093082 -0.000355545 0.000200447 0.000451293 -0.000283369 -0.000176975 -0.000015832 0.000060835 0.000034253 -0.000001165 -0.000005926 -0.000077321 -0.000047316 0.000078247 0.000013913 0.000015813 0.000020362 -0.000098213 -0.000022312 0.000004197 0.000008888 0.000133859 -0.000037094 0.000081733 -0.000020121 -0.000016357 0.000264053 0.000112202 0.000228872 0.000117274 0.000003906 -0.000007370 -0.000044368 0.000010700 0.000016809 0.000012858 -0.000159193 -0.000196665 -0.000330537 -0.000065837 0.000011810 -0.000158948 -0.000109893 0.000007808 -0.000023829 0.000026523 -0.000228551 0.000027160 -0.000139844 -0.000110377 -0.000024549 0.000032664 0.000010387 0.000008047 -0.000009334 -0.000006598 -0.000039143 0.000001116 0.000036561 0.000004810 0.000003110 -0.000001427 0.000010239 -0.000059375 0.000002274 0.000004123 0.000023872 0.000011035 -0.000001502 0.000001564 -0.000002639 -0.000020511 -0.000027209 0.000028633 0.000006853 0.000005385 -0.000042624 0.000019423 0.000004098 -0.000016122 -0.000008447 -0.000001073 0.000003444 -0.000003690 -0.000003515 -0.000000016 0.000002652 0.000008219 -0.000006946 -0.000003944 -0.000000866 -0.000011775 -0.000007304 0.000004985 -0.000001106 0.000000929 -0.000003355 -0.000002546 0.000002357 -0.000000371 0.000000287 -0.000000494 -0.000005621 0.000006068 0.000003477 0.000000231 0.000001867 0.000002058 -0.000002720 -0.000000059 -0.000000222 0.000006068 0.000003617 -0.000002560 0.000000566 -0.000000341 0.000002830 0.000000843 -0.000000666 0.000001432 -0.000000392 -0.000004187 -0.000003021 0.000003685 -0.000001102 0.000000560 -0.000000091 -0.000007483 0.000007621 0.000005257 0.000000180 -0.000003451 0.000000455 -0.000000834 -0.000002602 0.000000179 0.000002861 0.000001289 -0.000001739 0.000001490 -0.000000492 0.000007689 0.000004692 -0.000005424 0.000001485 -0.000000057 0.000018389 0.000008003 -0.000003610 0.000004039 -0.000000918 -0.000012593 -0.000004421 -0.000003008 -0.000002751 0.000000931 -0.000010314 -0.000004398 0.000004139 -0.000002719 0.000000065 0.000002236 0.000013552 -0.000016148 -0.000007128 -0.000000778 -0.000009123 -0.000001084 -0.000000622 -0.000002863 -0.000000406 -0.000039256 -0.000007664 -0.000002787 -0.000012366 0.000001488 -0.000024027 -0.000008078 0.000003216 -0.000006019 0.000000368 0.000036408 0.000013603 0.000000485 0.000008366 -0.000001826 -0.000000736 -0.000002846 0.000001080 0.000000444 0.000000841 0.000002304 -0.000008901 0.000011282 0.000006109 0.000000572 -0.000001566 0.000003589 -0.000005702 -0.000002489 -0.000000514 0.649679629 0.096236761 0.730677885 0.144144358 0.097300114 0.281273096 -0.309666471 -0.003818941 -0.239700880 0.597218928 -0.131549709 0.010159983 -0.003827242 0.008718949 0.190050569 0.062016818 0.011287839 0.001333680 0.010056908 -0.050245462 -0.190190687 -0.019578893 0.006252815 -0.012240004 0.141184692 -0.001848849 -0.324651737 -0.063275497 0.034480943 0.000678357 0.001210853 -0.062673593 -0.057201448 0.016714554 0.000911303 0.001940245 0.033896943 0.016776624 -0.060594199 0.000015575 0.028893551 -0.044926236 0.021455215 -0.057976967 -0.000157170 0.013522060 -0.002016999 0.023111859 -0.025750125 -0.000345240 -0.022516782 -0.013892474 -0.018130430 0.040723534 0.000794648 -0.043176655 -0.212450298 0.007829143 -0.060060002 0.000400221 0.020929849 0.039814948 -0.093024625 0.061494790 -0.001910528 -0.042311893 -0.123006451 0.052683930 -0.209179986 0.001332008 0.000889610 -0.004219174 -0.002658347 0.001474907 -0.000009051 -0.000350620 -0.002223843 0.006307905 0.003581009 0.000176860 -0.000166931 0.000852802 0.003024695 0.002685638 -0.000011777 -0.003239338 0.010557824 0.010351576 -0.018419606 0.000315757 0.002436862 -0.003658961 0.000186619 0.005534016 -0.000157848 -0.000660574 0.009931861 0.009447863 -0.012228219 0.000405347 0.000178163 -0.000016225 -0.000019756 -0.000208453 0.000006580 -0.000141707 -0.000102868 -0.000079315 0.000232504 -0.000061225 0.000163344 -0.000137040 0.000265043 -0.000357544 -0.000015962 -0.000136866 0.000071819 -0.000082911 0.000317191 -0.000017022 0.000014526 -0.000013228 -0.000018827 -0.000079830 -0.000005681 -0.000066337 0.000074828 0.000037146 0.000118188 -0.000008339 0.000010738 -0.000017433 -0.000013801 -0.000159337 0.000003799 -0.000067605 0.000167379 -0.000020144 0.000214528 0.000045921 -0.000098747 0.000004473 -0.000194844 0.000451697 0.000022189 0.000026974 0.000010907 0.000019384 -0.000066163 0.000000616 -0.000004669 0.000002798 -0.000018034 -0.000114521 -0.000013229 0.000006627 -0.000010367 -0.000012527 0.000051282 0.000004792 0.000089183 -0.000152791 0.000056762 -0.000277840 -0.000001791 -0.000061278 -0.000003868 -0.000114813 0.000138336 -0.000031488 -0.000004720 0.000024309 0.000061577 -0.000205892 -0.000019513 0.000002489 -0.000018039 -0.000006015 -0.000007429 0.000001665 0.000002825 0.000041268 0.000018276 0.000023400 0.000007194 -0.000020028 0.000028793 -0.000000236 0.000020034 -0.000001119 0.000004619 0.000029153 0.000027800 -0.000020750 0.000003043 -0.000030172 0.000020172 -0.000013515 0.000128154 0.000011299 -0.000020722 0.000029354 -0.000005215 0.000027701 -0.000000141 0.000019344 -0.000020539 -0.000009880 -0.000068185 -0.000010728 -0.000029630 0.000060378 0.000020545 0.000010332 0.000004010 0.000049633 -0.000051371 0.000018016 -0.000116795 -0.000007198 0.000008216 -0.000002064 0.000006525 -0.000009950 -0.000001196 -0.000002383 0.000006538 -0.000001162 0.000006068 0.000002206 -0.000004391 0.000002342 -0.000002028 0.000002167 -0.000002961 0.000000320 -0.000003054 -0.000003279 -0.000002044 -0.000001666 -0.000002999 0.000004171 -0.000001075 0.000008613 0.000003703 0.000004343 0.000002516 0.000005304 -0.000019592 -0.000002131 -0.000001143 0.000000544 0.000001535 -0.000002514 -0.000000711 -0.000001902 0.000000509 0.000001044 -0.000004485 -0.000001422 -0.000001400 0.000003053 0.000000225 0.000001069 0.000001688 -0.000000551 0.000000569 0.000000005 0.000000355 0.000000409 0.000001125 -0.000000665 -0.000001388 0.000003127 0.000000892 0.000000625 -0.000000315 0.000000307 -0.000000383 -0.000000393 0.000000579 -0.000001359 -0.000000087 -0.000000739 -0.000000839 0.000000840 -0.000000661 -0.000000601 0.000000494 -0.000000169 -0.000001352 0.000000691 0.000000140 0.000000020 0.000000491 0.000001871 -0.000001038 -0.000002109 0.000004466 0.000001166 -0.000001322 0.000001005 0.000000888 -0.000001420 -0.000000069 0.000001114 -0.000000606 -0.000000539 0.000000472 -0.000000233 0.000001936 -0.000001475 0.000000222 0.000000330 -0.000000488 0.000002153 -0.000004295 -0.000001329 -0.000000633 -0.000001981 -0.000001079 0.000004479 0.000001176 -0.000000539 0.000001442 -0.000002562 0.000002695 0.000000304 -0.000000877 0.000000757 -0.000001187 0.000001172 0.000003192 -0.000006366 -0.000002033 -0.000001631 0.000002306 0.000000440 -0.000000747 0.000000513 -0.000006024 0.000011852 0.000004271 -0.000003733 0.000003334 -0.000004117 0.000006669 0.000001277 -0.000001247 0.000002059 0.000004097 -0.000010396 -0.000003076 0.000000808 -0.000003558 0.000000604 -0.000000231 0.000000376 0.000000949 0.000000302 0.000001739 -0.000001898 -0.000002391 0.000004950 0.000001241 -0.000000315 0.000000810 0.000001024 -0.000001776 -0.000000544 0.055958701 -0.070447314 0.197482299 0.000663599 0.000534196 0.341602096 -0.003805597 -0.002571606 0.068901942 0.048386027 -0.002609892 -0.000398225 -0.036569843 -0.021428796 0.056343688 -0.000557855 0.000598507 -0.000729641 0.000523430 -0.002961750 -0.000807831 -0.000303382 0.000926281 0.003903334 0.003250157 0.000002807 0.000103502 -0.003814482 0.003116102 -0.001969947 -0.002343464 0.002523412 -0.014225258 0.008589728 -0.021894133 0.005141827 0.005474930 -0.005897692 0.005161053 -0.005565073 0.005334739 -0.001088889 0.006269895 -0.001165731 0.007382280 0.000151219 -0.000011826 -0.000732178 0.000361254 -0.000978370 -0.000811061 -0.000449429 -0.000263148 0.000161289 -0.000203086 -0.000409960 -0.000248955 0.000260328 -0.000001798 0.000222630 0.000536089 -0.000851198 0.000754163 0.000141936 0.000855033 -0.000051142 0.000239992 0.000522846 -0.002214308 -0.001467492 0.000524540 -0.000692195 0.000154679 -0.001541417 0.000123803 -0.000009481 -0.000023464 -0.000020774 -0.000026671 -0.000011555 0.000001325 -0.000011777 -0.000041956 0.000031878 0.000026135 -0.000036256 -0.000024709 -0.000016519 -0.000003839 0.000007121 0.000007432 0.000004875 0.000008958 0.000005090 0.000025301 0.000005604 0.000002404 -0.000008246 -0.000001769 -0.000011206 -0.000019467 -0.000005754 0.000015743 -0.000001004 0.000025466 0.000019235 0.000015767 0.000001574 0.000000881 -0.000023091 -0.000024023 -0.000007627 0.000009947 0.000004751 -0.000007602 0.000003259 0.000012706 0.000022328 0.000004100 0.000006729 0.000000575 -0.000009778 -0.000006503 0.000003350 0.000001248 0.000023846 -0.000004390 -0.000031802 0.000006748 -0.000008181 -0.000011050 -0.000002582 -0.000000933 0.000009487 0.000011246 -0.000015702 -0.000002861 0.000001120 -0.000002413 -0.000001073 0.000023619 -0.000005300 -0.000031362 0.000015136 0.000018911 0.000031542 -0.000005891 -0.000025854 -0.000000642 -0.000019026 -0.000000574 0.000002634 -0.000000676 0.000003547 0.000001880 -0.000005275 -0.000001235 0.000010434 -0.000008441 -0.000003192 0.000003973 -0.000001268 0.000004331 -0.000002997 0.000000775 -0.000005234 -0.000002899 0.000002473 -0.000002488 -0.000000336 -0.000013072 -0.000003055 0.000010035 0.000006151 0.000008085 -0.000001661 -0.000000587 -0.000002118 -0.000001605 -0.000002013 0.000009766 0.000002745 -0.000006698 -0.000003722 -0.000003926 0.000001116 -0.000001692 0.000003706 -0.000008476 -0.000007323 0.000005422 0.000002848 -0.000008657 -0.000002345 -0.000006936 -0.000001567 -0.000002662 -0.000003778 -0.000001446 -0.000001717 0.000000130 0.000000859 0.000002435 -0.000000173 -0.000000135 0.000001730 -0.000001627 -0.000002528 -0.000000994 -0.000000165 0.000000690 -0.000000760 -0.000005079 0.000002079 -0.000000348 -0.000000959 0.000002851 0.000006935 -0.000000147 0.000001040 0.000002065 -0.000001754 -0.000002415 -0.000000510 -0.000000107 -0.000000285 0.000000041 0.000000343 -0.000000024 -0.000000351 0.000000689 0.000000234 -0.000000122 0.000000751 0.000000009 -0.000000575 0.000001287 0.000001703 0.000000254 -0.000000130 -0.000000192 0.000000487 0.000000721 0.000000146 -0.000000044 0.000000025 0.000000129 0.000000133 -0.000000083 0.000000187 0.000000029 -0.000000594 -0.000000627 -0.000000265 -0.000000032 0.000000263 -0.000000566 -0.000000784 -0.000000106 0.000000101 0.000000383 -0.000000417 -0.000000718 -0.000000034 0.000000218 -0.000000340 0.000000983 0.000001318 0.000000331 -0.000000149 0.000000147 -0.000000033 -0.000000121 -0.000000128 0.000000361 -0.000000282 0.000000509 0.000000707 0.000000161 -0.000000186 0.000000420 -0.000000653 -0.000000970 -0.000000115 0.000000230 -0.000000176 -0.000001453 -0.000001598 -0.000000803 -0.000000153 0.000001027 -0.000001554 -0.000002148 -0.000000092 0.000000603 -0.000000508 0.000000618 0.000000871 -0.000000007 -0.000000273 0.000000091 0.000001635 0.000001867 0.000000891 0.000000016 -0.000000042 -0.000001057 -0.000001229 -0.000000275 -0.000000518 0.000000129 0.000000808 0.000000703 0.000000513 -0.000000058 -0.000001520 0.000003199 0.000004258 0.000000836 -0.000001112 -0.000000245 0.000002575 0.000002887 0.000001123 -0.000000299 0.000001596 -0.000002484 -0.000003729 -0.000000302 0.000000843 -0.000000733 -0.000000251 0.000000302 -0.000000564 -0.000000203 -0.000000047 0.000000359 0.000000411 -0.000000102 0.000000335 0.000000054 -0.000000393 -0.000000490 -0.000000076 -0.000000146 0.774459691 0.061270729 0.258992701 0.065096236 -0.207538206 0.578753109 -0.396573877 -0.049633697 -0.000241289 0.723647854 -0.081930677 -0.093335843 0.029784168 0.092457037 0.275581706 0.059914509 0.039086313 -0.124685571 -0.003782814 -0.236238378 -0.182685375 0.044954010 -0.134773769 -0.014135285 0.008618190 0.045432113 -0.061069443 0.059111438 -0.006018945 0.006490001 -0.134248206 0.058944934 -0.200778028 0.005070141 -0.000365214 -0.004083285 -0.014630503 0.026797597 -0.085382232 -0.042221614 -0.000194759 0.001833521 0.005755929 -0.042924363 -0.104747577 -0.001392754 0.001727294 0.000955815 0.069989815 0.117718463 -0.001670764 0.000627868 0.000968127 0.000179259 0.000116105 0.000247554 0.000122841 -0.000305997 -0.000348669 -0.000305705 -0.000188510 -0.000407776 0.000399038 0.000682722 -0.000020704 0.000726873 -0.000020844 -0.000720835 -0.000298392 -0.000155932 -0.000018461 0.000184495 0.000157235 0.000072778 0.000077018 0.000172578 0.000145512 -0.000522314 -0.000052149 -0.000109815 -0.000405936 0.000778842 0.001025554 0.000107043 -0.000034664 0.000427808 -0.000799144 -0.000032769 -0.000225170 -0.000009840 0.001158648 -0.001255091 -0.000176678 -0.000862743 -0.000280574 -0.000111611 0.000038505 -0.000161136 0.000136870 0.000078607 0.000038247 0.000236607 0.000424668 0.000071336 0.000121198 -0.000096986 0.000076197 -0.000444474 0.000015207 -0.000082478 -0.001191402 0.001302169 0.000822869 0.000351822 0.000051541 0.000988423 -0.000672593 -0.000855388 -0.000312443 -0.000093052 0.000120972 -0.000203696 -0.000233413 0.000385088 0.000252951 -0.000015626 0.000002330 -0.000042438 0.000005317 -0.000024648 -0.000018850 0.000052783 -0.000032664 -0.000006687 0.000038221 0.000051938 -0.000017426 0.000030750 -0.000036356 0.000008122 -0.000082011 0.000033453 -0.000016471 0.000066314 0.000028422 0.000101669 -0.000289309 -0.000243120 -0.000141741 -0.000092026 0.000019538 0.000106563 -0.000001490 0.000008151 0.000020154 0.000016602 0.000072707 0.000238019 0.000025652 0.000031189 0.000083253 0.000080688 0.000084849 -0.000004036 0.000050560 -0.000143494 0.000172258 0.000183426 0.000119774 0.000067382 -0.000036257 0.000003221 0.000015455 0.000022826 0.000014505 0.000018505 0.000001608 -0.000025782 -0.000004856 0.000003488 0.000023855 -0.000002545 0.000018829 -0.000005927 0.000001497 0.000001130 0.000018142 -0.000007853 0.000016836 0.000008394 0.000009743 -0.000001993 -0.000018343 -0.000020450 -0.000009921 -0.000017082 0.000025044 0.000006116 0.000022660 0.000012978 0.000001411 -0.000001204 0.000003784 0.000002518 0.000001324 0.000000272 -0.000003793 0.000004679 0.000004024 0.000000468 0.000005486 0.000002717 -0.000003729 -0.000002303 -0.000000562 0.000001632 0.000000726 -0.000001201 -0.000000599 -0.000000173 -0.000000677 0.000001960 -0.000004188 -0.000002630 -0.000000827 -0.000000963 -0.000000591 0.000001795 0.000000690 0.000000445 -0.000002719 -0.000001227 0.000001586 0.000001070 0.000000207 -0.000001672 -0.000000332 -0.000000103 -0.000000342 -0.000000390 0.000002354 0.000000839 -0.000001731 -0.000000376 -0.000000108 -0.000001345 0.000002397 -0.000005718 -0.000003834 -0.000001427 0.000002283 -0.000000256 0.000001038 0.000000858 0.000000367 -0.000001791 -0.000000545 0.000000460 -0.000000252 -0.000000345 -0.000003828 -0.000000352 0.000002704 0.000000776 0.000000910 -0.000008390 -0.000003327 0.000001416 0.000001421 -0.000000783 0.000005730 0.000002553 0.000000383 -0.000000923 0.000000440 0.000005792 0.000000103 -0.000002368 -0.000000340 -0.000000794 0.000000376 -0.000004216 0.000011055 0.000006014 0.000002528 0.000004574 -0.000000632 -0.000000099 -0.000000082 -0.000000523 0.000019791 0.000003556 0.000001511 0.000000275 0.000001447 0.000012004 0.000001710 -0.000002158 -0.000000771 -0.000000419 -0.000017488 -0.000004981 0.000001003 0.000002240 -0.000000713 0.000000066 0.000001754 -0.000000208 -0.000000895 0.000000570 -0.000002338 0.000003444 -0.000007291 -0.000004052 -0.000001234 0.000001030 -0.000001577 0.000003622 0.000001720 0.000000694 0.608793513 -0.022891220 0.196215678 -0.004814897 -0.048866666 0.053557540 0.007186300 0.142786526 -0.066171410 0.206761280 0.069394660 0.000885900 0.000896376 0.000189505 0.085478809 0.117311161 0.000679973 -0.004038919 -0.002468870 0.046701894 -0.252583600 0.000443067 -0.002432037 -0.000450893 -0.074811073 0.000111604 -0.003003427 0.000737061 0.000604397 -0.000027780 -0.000113346 0.000971198 0.000515771 -0.000125222 -0.000086105 0.000350131 0.001247612 -0.000359905 0.000017890 -0.000024299 -0.000005324 0.000251686 0.000049493 0.000275431 -0.000016025 -0.000070256 -0.000112282 0.000104225 -0.000156327 -0.000009050 0.000172081 0.000242371 -0.000017593 0.000296090 0.000006562 -0.000133427 -0.001286273 0.001020033 0.000207739 0.000054776 -0.000116293 0.001239227 -0.001050907 -0.000544371 0.000007779 -0.000354581 0.000916692 -0.000680034 -0.000312546 -0.000009449 0.000045815 0.000025630 -0.000140433 0.000017005 0.000027290 -0.000017964 -0.000334392 0.000062011 -0.000177234 0.000010183 0.000007152 0.000147274 -0.000093617 0.000189204 -0.000025969 0.000202164 0.000021950 -0.000086336 -0.000052100 0.000001520 0.000032667 0.000014621 0.000006407 0.000062778 -0.000051586 0.000107372 -0.000144140 -0.000069560 -0.000201643 0.000010208 0.000004626 0.000004176 0.000001418 0.000012346 -0.000007705 0.000006270 -0.000034199 -0.000022051 0.000017766 0.000017072 0.000011389 -0.000017286 -0.000019861 -0.000010572 0.000022119 0.000037219 0.000002286 -0.000039575 0.000007119 0.000005237 -0.000025522 0.000232865 -0.000089382 0.000174422 0.000008889 -0.000005683 -0.000051897 -0.000039391 -0.000067273 -0.000008943 0.000006359 -0.000177345 0.000130606 -0.000091007 -0.000008547 -0.000009329 -0.000053602 -0.000052658 -0.000041739 0.000029377 0.000011641 -0.000122592 0.000113266 -0.000112919 -0.000026000 0.000002835 0.000018499 -0.000012383 -0.000030585 -0.000004024 -0.000004773 -0.000006720 -0.000003637 0.000010647 0.000004027 -0.000006440 -0.000007586 0.000007321 -0.000002141 0.000002360 -0.000009357 0.000008066 -0.000002872 -0.000014588 -0.000007549 0.000006712 -0.000013963 -0.000000385 0.000022653 0.000005543 0.000010399 -0.000017859 -0.000007357 -0.000009971 0.000004570 -0.000000298 0.000000368 0.000000051 -0.000001705 0.000000530 -0.000001045 0.000000811 0.000002099 -0.000002259 0.000000628 0.000000662 -0.000002079 -0.000001489 0.000002703 0.000000436 0.000000159 -0.000000746 -0.000000469 0.000000983 0.000000043 0.000000147 -0.000000794 -0.000000728 0.000002083 -0.000000644 -0.000000063 0.000000712 0.000000198 -0.000001135 0.000000057 -0.000000266 0.000000895 0.000000742 -0.000001286 -0.000000126 0.000000025 0.000000486 0.000000398 -0.000000213 -0.000000197 0.000000003 -0.000001172 -0.000000543 0.000001391 0.000000053 0.000000271 -0.000000871 -0.000000711 0.000002850 -0.000000914 0.000000061 -0.000000327 -0.000000135 -0.000000096 0.000000432 0.000000042 0.000000721 0.000000501 -0.000000510 -0.000000160 -0.000000039 0.000001758 0.000000127 -0.000002432 -0.000000305 -0.000000537 0.000001925 0.000002574 -0.000001815 -0.000000619 0.000000854 -0.000001146 -0.000001616 0.000000088 0.000000936 -0.000000098 -0.000001900 0.000000131 0.000002481 0.000000583 -0.000000402 0.000002732 0.000001364 -0.000005916 0.000001258 0.000000043 -0.000000349 0.000000399 0.000000966 0.000000435 0.000001006 -0.000003636 -0.000003214 0.000001697 0.000002637 0.000000101 -0.000002907 -0.000001041 0.000003057 0.000001246 -0.000001906 0.000003639 0.000003738 -0.000002751 -0.000002133 0.000000804 -0.000000274 -0.000001428 0.000000032 -0.000000010 0.000000155 -0.000001598 -0.000001414 0.000003424 -0.000001165 -0.000000149 0.000000968 0.000000551 -0.000001715 0.000000446 0.098824455 -0.129786962 0.262289349 0.000053521 0.000052053 0.506039889 -0.000027184 0.000046815 0.016898645 0.680764080 -0.000070061 -0.000001794 0.232761233 -0.000165004 0.342548469 -0.000038152 -0.000017835 -0.211878643 0.027866462 -0.091903857 0.000026046 0.000018438 0.029927872 -0.163571408 0.020282710 -0.000042497 -0.000032622 -0.090296941 0.026628210 -0.144731836 0.000044519 -0.000011794 -0.169252655 -0.083110987 -0.072600313 0.000008016 -0.000024240 -0.059323350 -0.183961475 -0.041670414 0.000058119 0.000016410 -0.075128116 -0.061397846 -0.127706839 -0.000017752 -0.000009372 0.031904837 0.003684674 0.017823615 0.000006521 0.000022104 -0.032052844 -0.062809031 -0.022119683 0.000004030 0.000018951 0.018424120 0.003755148 0.022269120 -0.000007676 0.000006663 -0.009287323 0.005567141 -0.009331239 -0.000011224 0.000040108 -0.016841876 0.010804364 -0.013067370 -0.000023574 -0.000023075 -0.008395278 0.005278186 -0.002894246 0.000006374 0.000010610 0.003357373 0.001578163 -0.004218590 -0.000014516 -0.000025907 0.002196258 -0.004469310 0.001942001 -0.000011491 -0.000023259 -0.003879805 0.001825168 0.005915965 -0.000011507 -0.000011658 0.007466384 0.033059942 -0.001306217 0.000002761 -0.000007599 0.046626890 0.020275801 0.036023318 -0.000007979 -0.000006549 -0.001220909 0.021871853 0.006306286 0.000005312 0.000013391 -0.033801055 -0.029153298 -0.018849314 -0.000015189 -0.000026706 -0.009077010 -0.005377750 -0.007017186 0.000006346 0.000020146 -0.018357472 -0.021889083 -0.021640240 -0.000004981 -0.000000732 0.002811714 0.000707960 -0.001571171 0.000001009 -0.000002812 -0.000540045 -0.005140334 0.000124406 -0.000000683 0.000000840 -0.002038217 0.000805246 0.003482559 0.000000747 0.000006028 -0.000675206 -0.000657537 -0.000104184 0.000000861 -0.000004649 -0.000277801 0.000536430 -0.000213984 -0.000001833 -0.000000540 -0.000188358 -0.000479128 -0.000692424 0.000000067 -0.000000419 -0.000004151 -0.000007345 -0.000002888 0.000001120 -0.000000104 -0.000010680 -0.000004136 -0.000003351 0.000000672 -0.000001163 0.000007177 -0.000006478 0.000004133 0.000000215 -0.000000356 0.000002355 -0.000000785 0.000000969 -0.000000425 0.000000356 0.000006844 0.000007138 0.000002183 -0.000000344 0.000000328 -0.000002261 -0.000002583 -0.000000752 -0.000000178 0.000000399 -0.000002983 0.000003291 -0.000001746 -0.000000144 0.000000503 -0.000000594 0.000003130 0.000000053 0.000000451 -0.000000725 0.000002795 0.000000365 0.000000697 -0.000000536 0.000000689 0.000008293 0.000009266 0.000003860 0.000000462 -0.000000641 -0.000001461 -0.000004662 -0.000000478 -0.000000232 0.000000666 -0.000001616 0.000001422 0.000000234 -0.000001209 0.000000809 0.000000613 -0.000003406 -0.000001231 -0.000000236 0.000001358 -0.000007367 0.000013477 -0.000004374 0.000000403 -0.000001115 0.000007435 -0.000017028 0.000004739 0.000001427 -0.000000992 -0.000002222 -0.000001830 0.000000105 0.000000091 -0.000000162 -0.000015686 -0.000018867 -0.000004569 0.000000873 -0.000000340 -0.000006057 -0.000005806 -0.000001129 0.000002163 -0.000003422 0.000008317 -0.000047721 0.000007508 0.000001913 -0.000001734 0.000003548 -0.000020483 0.000004191 -0.000001428 0.000002967 -0.000011677 0.000042142 -0.000007751 -0.000000640 -0.000000382 0.000005615 0.000000029 0.000001007 -0.000000666 0.000000409 0.000015161 0.000016429 0.000004243 0.000000067 0.000000132 -0.000006553 -0.000010655 -0.000001418 0.526022596 0.027568860 0.711278762 0.234609475 -0.016634865 0.328394468 -0.020165512 -0.004218215 -0.021893314 0.511533897 -0.016756949 0.059144079 -0.017312872 -0.042622941 0.738325792 -0.019713312 -0.005215139 -0.005921277 0.282077043 -0.043721633 -0.010037028 0.032202621 -0.004025142 -0.118152895 0.020309201 0.010389182 -0.039126149 0.009984302 0.076431977 -0.397176035 -0.001764419 0.024660843 -0.011840918 -0.041784057 0.025446851 0.001388248 -0.003186762 -0.002950466 -0.218216699 0.056493144 -0.002096919 -0.003282695 -0.001367462 0.056371976 -0.077132923 -0.002794093 -0.001910764 0.002668545 -0.140944444 0.044333760 -0.000090246 0.000632989 0.000335999 0.007349722 0.006442112 0.000522858 -0.000383350 0.000425495 -0.019351679 -0.015493281 0.000411079 0.000905286 -0.000388714 0.002584282 0.004393916 -0.108247288 0.057043030 -0.029493116 -0.006919257 -0.017518714 0.031522252 -0.281471841 0.030555683 -0.013252019 -0.062518826 -0.029207355 0.051010230 -0.094612384 -0.000283037 -0.010370420 0.018878785 -0.052816421 0.010783948 0.009360831 0.070264402 -0.017835282 -0.046263305 -0.009390784 0.029415402 0.002356466 0.007588071 -0.035633904 0.017462792 -0.001686695 0.052203888 -0.001236596 -0.000116884 -0.003407091 0.000085656 -0.000627505 0.023441830 -0.003806929 0.017069918 -0.000409836 -0.000807939 -0.003924360 -0.001059731 0.000756585 0.000755894 0.000242196 0.000610098 -0.002447287 -0.005884323 -0.001453917 0.000454202 -0.003223423 -0.000516639 -0.001901038 0.001169947 0.001346534 -0.005676553 -0.001428008 0.004876580 -0.005315231 0.000432041 -0.000002981 0.000001002 -0.000003357 0.000001748 0.000003066 0.000003951 -0.000006374 -0.000007712 0.000007227 -0.000001176 -0.000004353 0.000005321 0.000001781 -0.000005923 0.000003806 -0.000000900 0.000001293 0.000000841 -0.000001507 0.000000991 -0.000000569 0.000000595 0.000006004 -0.000003942 -0.000001369 0.000000616 -0.000000669 -0.000002370 0.000001561 0.000000405 0.000001831 -0.000002004 -0.000000442 0.000002438 -0.000001822 0.000001087 -0.000000322 0.000000021 0.000000722 -0.000001619 -0.000001309 0.000000582 0.000002223 -0.000001990 0.000000903 0.000001925 -0.000001690 0.000005621 -0.000003896 -0.000002643 -0.000001352 0.000001124 -0.000002118 0.000000337 0.000001891 0.000001849 -0.000000760 -0.000001655 0.000001539 -0.000001450 0.000001447 -0.000000189 0.000000948 0.000003282 0.000001248 0.000006891 -0.000019477 -0.000004918 0.000006943 -0.000008725 -0.000004655 0.000015532 0.000000559 -0.000003725 0.000008796 -0.000003590 -0.000003909 -0.000003592 -0.000002894 -0.000000344 -0.000000116 0.000003667 -0.000013080 0.000009967 0.000005237 0.000003465 0.000001109 -0.000002503 0.000001451 -0.000000628 -0.000011008 0.000024102 -0.000005425 -0.000005661 0.000021121 -0.000006529 0.000008118 -0.000000184 -0.000004372 0.000007428 0.000011924 -0.000023070 0.000004309 0.000008971 -0.000018370 -0.000003637 0.000006683 0.000002191 -0.000003446 0.000002515 -0.000001321 0.000001237 0.000010602 -0.000007524 -0.000002143 0.000002596 -0.000004785 -0.000008683 0.000004350 0.000001418 0.361911303 -0.040288388 0.493935769 0.065863996 0.028896373 0.768324170 -0.098421521 0.268050438 0.004366424 0.346094112 -0.142222780 0.001014117 -0.001274706 -0.003040676 0.225820438 0.045229804 0.024254702 -0.003464063 0.018671289 -0.063456317 -0.149227556 -0.004283581 -0.000340065 0.001968571 0.154819748 0.001982567 -0.148507130 -0.115007322 -0.080969901 -0.001451059 -0.014363086 -0.113958033 -0.194428896 -0.082935299 0.000158022 0.006639445 -0.081446181 -0.083040831 -0.099446835 0.002973879 -0.000334382 -0.031474440 -0.001216870 -0.030554193 0.000176110 -0.007953480 -0.042904848 0.059793144 -0.032645526 -0.000110040 -0.005629151 -0.029158664 -0.002494404 -0.011127349 0.000712488 -0.002969825 -0.215000482 0.011542108 -0.113277721 0.003789292 0.022682898 0.068698516 -0.145074847 0.054013520 0.000601363 0.006908169 -0.114115775 0.011591417 -0.155695917 -0.003566505 0.000631228 0.001843679 -0.003426724 -0.004533724 -0.000412925 -0.000285123 -0.002484053 -0.002745436 -0.001350731 0.000069263 -0.000136129 -0.004358387 -0.002263566 0.005369361 0.000488329 -0.005277194 0.000923060 0.024069557 -0.002536719 -0.000055005 0.001094827 -0.001516747 -0.003890664 -0.000901824 -0.000078466 0.001314884 -0.001631884 0.018241861 0.001322184 -0.000104297 0.000000798 0.000001116 -0.000002449 -0.000000090 -0.000001822 0.000002684 -0.000000055 -0.000010367 -0.000003193 -0.000003999 -0.000004007 -0.000000007 0.000006121 0.000001148 0.000001802 -0.000001599 0.000000132 0.000001684 -0.000000353 0.000000190 -0.000002781 0.000000234 0.000006169 0.000000884 0.000001952 0.000002045 -0.000000296 -0.000002277 0.000000142 -0.000000286 0.000002320 -0.000000098 -0.000001906 0.000000173 -0.000000174 0.000000491 -0.000000046 -0.000000878 -0.000000064 -0.000000014 -0.000002687 0.000000416 0.000002805 -0.000000471 0.000000066 -0.000002554 -0.000000690 0.000005723 0.000000237 0.000002543 -0.000000402 0.000000122 -0.000001046 -0.000000618 -0.000000864 0.000001303 -0.000000470 -0.000002599 -0.000000483 -0.000000261 0.000006847 -0.000000666 -0.000001821 0.000003279 0.000002463 0.000004553 -0.000000499 -0.000007382 -0.000000759 -0.000000642 0.000002411 -0.000000279 0.000005605 0.000003869 0.000003248 -0.000007791 0.000000839 -0.000000363 -0.000003703 -0.000003156 0.000008966 -0.000000751 -0.000014147 -0.000000926 -0.000003696 -0.000004153 -0.000001725 -0.000007851 -0.000005465 -0.000004193 -0.000001363 -0.000000633 0.000000873 0.000000752 0.000000025 -0.000007199 0.000000073 -0.000000335 -0.000003683 -0.000002849 0.000004629 0.000000203 -0.000004058 -0.000001202 -0.000000867 0.000000501 0.000000506 0.000006507 0.000002968 0.000002589 -0.000003381 0.000001460 0.000015146 0.000003698 0.000005150 0.000002990 -0.000001116 -0.000008742 -0.000002101 -0.000002453 0.081281784 -0.048322925 0.147009353 -0.000123073 0.003036693 0.149654029 0.000986962 -0.000072474 0.122702228 0.202998565 -0.000117136 -0.003171207 0.091120111 0.089232884 0.093908012 -0.000431553 0.000621550 -0.000824632 0.001694103 -0.004917522 -0.000884999 -0.000812695 0.002462879 0.000399885 0.001874819 -0.000354130 -0.000150445 -0.004847076 0.001351486 0.001562748 0.000128969 -0.003020486 -0.008517580 0.007088296 -0.008848735 -0.005129715 0.000996544 -0.018209328 0.009844498 -0.014189053 0.000330197 0.006164341 -0.008686154 0.005284348 -0.002853316 0.000021579 0.000448486 -0.000551452 0.000381058 -0.000546299 0.000070160 -0.000007896 -0.000792039 0.000324246 -0.000662060 0.000024558 -0.000724122 -0.000387025 0.000216511 -0.000195431 0.001025514 -0.000148793 -0.000417424 -0.000432002 0.001995122 -0.000272971 -0.000038739 0.000251817 0.000590562 0.000046827 0.000793390 -0.000005897 0.001981513 -0.000407642 -0.001485630 -0.000001910 -0.000000401 -0.000000323 -0.000000457 0.000000380 -0.000001048 -0.000000291 -0.000002740 -0.000002423 0.000000907 -0.000000396 0.000000467 0.000002108 0.000002253 -0.000000044 0.000000038 0.000000661 0.000000388 0.000000777 0.000000551 0.000001744 0.000001337 0.000001246 0.000001461 0.000000175 -0.000000604 -0.000000744 -0.000000239 -0.000000456 -0.000000384 0.000000156 -0.000000641 -0.000000712 -0.000001094 -0.000000369 0.000000727 -0.000000161 -0.000000743 -0.000000610 -0.000000312 0.000000080 0.000001158 0.000000715 0.000001022 0.000000947 0.000002550 0.000001600 0.000001201 0.000001664 0.000000269 -0.000001056 -0.000000092 -0.000000099 -0.000000049 0.000000402 0.000000520 -0.000000411 -0.000001015 -0.000000765 -0.000000365 -0.000000790 -0.000002552 0.000000769 -0.000000435 -0.000001951 0.000002487 -0.000000498 -0.000002397 -0.000002904 -0.000000226 -0.000002454 -0.000002491 0.000002069 0.000001541 -0.000002024 0.000000254 0.000002591 -0.000000521 0.000000671 0.000002071 -0.000004640 -0.000003986 -0.000002446 -0.000003289 -0.000001173 -0.000000594 0.000001142 -0.000001817 -0.000000537 0.000001628 -0.000006913 -0.000001784 0.000003175 0.000003949 -0.000000092 -0.000002039 0.000001953 0.000000556 0.000002064 0.000001847 0.000005236 0.000001171 -0.000003350 -0.000004276 0.000000195 -0.000000608 -0.000000799 0.000001684 0.000001211 -0.000000810 0.000003178 0.000002053 0.000002770 0.000002723 -0.000000120 -0.000001655 -0.000000934 -0.000001222 -0.000001156 0.000000141 0.564938348 0.042613901 0.686974169 0.300985829 0.004858707 0.358743359 -0.211610284 -0.091600563 -0.100537640 0.496974387 -0.146494534 -0.271372477 -0.097825086 0.032962931 0.777992822 -0.099375031 -0.058447797 -0.134915009 0.263278139 -0.004349685 -0.221917351 0.058508464 -0.133701310 -0.008809821 0.008313484 0.059380642 -0.080480909 0.044731266 -0.018172240 0.010395396 -0.133368908 0.045306443 -0.135357905 -0.009868765 0.005262835 0.007758053 -0.019559183 0.003249845 -0.060598867 0.046365118 0.006590171 -0.015629930 0.005679749 0.045644923 -0.327618342 0.002381141 -0.013325416 0.006586239 -0.018245422 0.046006090 0.000001603 0.000001028 0.000001159 -0.000002641 -0.000000634 -0.000005610 0.000006406 -0.000008179 -0.000004487 -0.000006415 0.000006622 -0.000006963 0.000005748 0.000002773 0.000006198 0.000002563 -0.000001817 0.000001172 0.000001648 0.000001294 0.000003222 -0.000003324 0.000003563 0.000004206 0.000002259 -0.000002191 0.000001983 -0.000001446 -0.000002034 -0.000000456 -0.000003387 0.000002968 -0.000002252 -0.000001347 -0.000002356 -0.000001554 0.000001061 -0.000001087 -0.000000504 -0.000000994 0.000003780 -0.000002686 0.000002080 0.000002774 0.000001003 0.000001662 -0.000002541 0.000001077 0.000005115 0.000001968 0.000001498 -0.000000509 0.000000038 -0.000000541 0.000000025 -0.000002723 0.000002034 -0.000002631 -0.000001350 -0.000001258 -0.000008265 0.000006199 -0.000002713 -0.000003449 0.000000709 -0.000008626 0.000009397 -0.000010254 -0.000002812 -0.000010169 0.000000967 -0.000004266 0.000005984 -0.000001499 0.000011260 0.000008661 -0.000006294 0.000002337 0.000002361 -0.000001323 -0.000010056 0.000009223 -0.000007455 -0.000010792 -0.000003385 -0.000000068 -0.000002118 -0.000005606 -0.000000096 -0.000004065 0.000007256 -0.000008736 0.000006647 -0.000003185 0.000016842 0.000009128 -0.000008754 0.000002749 0.000001390 0.000005297 -0.000010801 0.000011749 -0.000009585 0.000001245 -0.000016313 0.000003496 -0.000002313 0.000005636 0.000001240 0.000004742 0.000006800 -0.000004990 0.000008903 0.000007907 0.000005930 -0.000004839 0.000004366 -0.000006198 -0.000004859 -0.000002534 0.335364984 -0.010314219 0.229451218 -0.013290907 -0.062807140 0.080812371 -0.002316070 0.148226375 -0.047459533 0.133790307 -0.018251470 -0.001249846 0.000492289 0.002940995 0.055031724 0.045639818 0.000030737 0.000923083 -0.000269116 -0.048938669 -0.054089842 0.002912293 0.000104263 -0.003204608 0.023273741 -0.000001565 -0.000000845 0.000001221 -0.000001706 0.000000186 -0.000006255 -0.000000070 0.000002007 0.000003041 -0.000001822 0.000003393 -0.000001274 -0.000001162 -0.000001807 0.000000806 0.000000435 -0.000000821 -0.000000494 0.000000459 -0.000000279 0.000003451 -0.000000122 -0.000001879 -0.000000290 0.000000490 -0.000001070 0.000000384 0.000000754 -0.000000125 0.000000018 -0.000000936 0.000000822 0.000000374 0.000000357 -0.000000023 -0.000000560 0.000000686 0.000000457 0.000000374 -0.000000014 0.000001176 -0.000001180 -0.000001189 0.000000284 -0.000000277 0.000002921 0.000000110 -0.000002481 0.000001976 -0.000000187 -0.000000960 -0.000000758 0.000000290 0.000000112 -0.000000274 -0.000001632 0.000000774 0.000000894 0.000001146 -0.000000355 0.000000040 0.000002255 0.000000501 -0.000000944 0.000000626 -0.000005116 0.000001938 -0.000000419 0.000005779 -0.000001252 0.000004079 0.000000188 0.000001441 -0.000005884 0.000001914 -0.000001053 -0.000002546 -0.000000145 0.000001176 -0.000000792 -0.000007265 0.000001239 0.000004958 -0.000000990 -0.000000496 -0.000004367 -0.000001131 0.000001252 0.000004029 -0.000002209 0.000000834 -0.000003414 0.000002824 -0.000005773 0.000000382 -0.000000379 -0.000003244 0.000000900 -0.000000659 -0.000000836 -0.000002538 0.000003361 -0.000002336 0.000006126 -0.000000997 0.000003370 -0.000000213 -0.000000438 -0.000003018 0.000001365 0.000007928 -0.000000071 -0.000003959 -0.000002080 0.000001604 -0.000004605 0.000000159 0.000001676 0.000001776 -0.000001139 0.345369120 -0.049371349 0.045653221 0.000000908 0.000000104 0.508570935 -0.000002913 0.000001807 -0.010266835 0.557758752 0.000003047 -0.000000872 -0.029441151 0.002998382 0.593246717 0.000000911 0.000000297 -0.047177662 0.008602905 0.010418793 0.000001422 -0.000000475 0.006768090 -0.187063429 -0.133828397 -0.000000744 -0.000000119 0.008413298 -0.134908424 -0.179622766 -0.000001350 0.000000063 -0.107454582 -0.044710113 0.102710513 -0.000001169 0.000000273 -0.044939911 -0.081219401 0.075260349 0.000001707 0.000000189 0.105216813 0.077265006 -0.229805374 0.000000508 -0.000000063 -0.122271829 0.110081245 -0.052342876 0.000000596 0.000000338 0.106458609 -0.196035410 0.074106009 -0.000001833 0.000000515 -0.051628848 0.074987417 -0.083793166 -0.000002010 -0.000001712 -0.019159097 -0.008989134 0.025475220 -0.000004681 0.000001474 -0.005542632 -0.001144684 0.005337723 0.000001616 -0.000002244 -0.000563389 -0.000062357 0.006836818 0.000002321 0.000001614 0.000542321 0.000114513 0.000192706 -0.000003641 0.000000136 0.000030829 -0.000285205 0.000486724 -0.000001207 0.000001989 -0.000526617 0.000150583 -0.000370181 0.000004776 -0.000001715 -0.000489222 0.000564287 0.002074087 0.000003273 0.000000812 -0.001327067 -0.000793135 0.001962674 -0.000005392 0.000001651 0.001267712 0.000168439 -0.003579737 0.000001986 -0.000001240 0.000617486 0.001076045 0.000992897 0.000003297 -0.000001279 -0.000059321 0.000593296 0.000890330 -0.000001926 0.000000724 -0.001563756 -0.000821684 0.001115890 0.054140058 -0.007432022 0.197682281 -0.006710789 0.146770604 0.188421169 -0.000829117 0.000438421 -0.000979546 0.117520365 0.011984493 0.010935650 -0.018107526 0.049030601 0.081695793 0.007797274 0.009095310 -0.013154553 -0.111802963 -0.082644508 -0.000550854 0.000280370 -0.000366262 0.009133001 -0.012591158 0.011017896 -0.015706271 0.009713125 0.005089395 -0.007172185 0.012788206 -0.017185552 0.009802136 -0.014860541 0.019300694 0.001336598 0.000583846 0.000804398 -0.004584278 -0.001583708 -0.000179616 0.000322200 0.001248411 -0.001590380 0.000326340 -0.001331834 -0.000644414 0.000444454 -0.002524050 -0.001357985 0.000029510 0.000029099 0.000110502 -0.000297656 0.000368830 0.000118950 -0.000009652 0.000011156 -0.000331214 0.000118262 0.000114351 -0.000057849 0.000004460 0.000170876 -0.000107760 0.000138572 0.000055136 0.000058531 -0.000384610 0.000069148 0.000176033 0.000231245 0.000172360 -0.000729733 -0.000024880 -0.000080839 0.000233747 0.000086675 0.000920984 0.000438426 -0.000522846 -0.000598594 0.000343721 0.000170364 0.000117987 -0.000012128 0.000046912 -0.000039568 0.000011934 0.000060889 0.000843000 0.000546279 0.000281253 -0.000468323 0.000155952 0.244153041 0.005171696 0.134518182 0.001894741 -0.114783057 0.206522728 -0.007932874 0.060269669 -0.079654137 0.084037935 -0.001177087 0.001435573 0.000701174 -0.000017695 0.570541472 -0.000359022 0.000236116 0.000381537 0.000110353 0.000838754 -0.000121021 -0.000344129 -0.000249963 0.000060358 0.032926268 -0.000004090 -0.000328649 0.000256580 -0.000105850 -0.048825191 0.000040503 -0.000313816 -0.000129843 0.000035718 0.036187259 0.000029954 0.000138274 -0.000038231 0.000177876 -0.012255611 -0.000190607 -0.000076960 0.000105662 -0.000093746 -0.306548347 0.000069102 -0.000110022 -0.000011166 -0.000014402 0.031872008 0.000355606 0.000069412 -0.000117136 -0.000066166 -0.053313315 -0.000111199 -0.000144380 0.000064963 -0.000022786 -0.062263309 0.000174145 0.000117706 -0.000142764 -0.000203704 -0.038238898 0.000273146 0.000191784 0.000062372 0.000008577 -0.047803085 0.559664739 0.030802078 0.536418435 0.032370484 -0.011841528 0.050534733 -0.282254893 0.073150094 -0.034116075 0.302530231 0.074798681 -0.068205055 0.007747202 -0.082271477 0.076555664 0.031868219 -0.058195436 -0.001666356 -0.000913418 -0.000599846 -0.048875440 0.004836733 0.029522794 -0.002785022 0.007029294 0.004380842 -0.060539300 -0.008197890 0.000052703 -0.002284934 -0.039732224 -0.050942452 0.000710351 0.003644865 0.004288572 -0.146597539 -0.130224542 -0.007486450 -0.015227827 -0.022259115 -0.126905920 -0.211400993 0.003083285 0.006700251 0.009310817 0.328548537 -0.032062714 0.057098565 0.059191116 -0.005210939 0.064538801 -0.003455216 -0.019369954 -0.022915774 0.064476563 0.001523430 0.003022725 0.005081322 0.042425260 0.157890299 0.000113169 -0.002780891 -0.003703192 0.047609150 0.136294609 0.228522408</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.002032104 0.000007429 0.000020834 0.000031336 0.000036097 0.000040142 0.000052466 0.000055674 0.000066166 0.000097694 0.000107873 0.000116809 0.000145230 0.000164265 0.000170257 0.000190365 0.000217218 0.000221352 0.000234075 0.000281865 0.000298115 0.000320802 0.000340120 0.000362940 0.000370427 0.000417645 0.000459695 0.000524403 0.000574249 0.000635660 0.000671183 0.000749294 0.000814177 0.000868708 0.001054426 0.001077671 0.001136093 0.001201285 0.001243138 0.001278544 0.001318369 0.001508954 0.001527966 0.001557285 0.001667421 0.001751538 0.001862235 0.001899794 0.001920513 0.002033000 0.002061216 0.002342088 0.002373141 0.002434885 0.002550417 0.002701280 0.002787562 0.002855526 0.003007680 0.003123914 0.003192170 0.003395873 0.003818702 0.004032916 0.004274950 0.004310848 0.004398744 0.004493758 0.004740496 0.004927379 0.005120123 0.005607147 0.006025049 0.006193102 0.006387910 0.006814163 0.006861066 0.006920051 0.007308346 0.007650698 0.007713857 0.007818516 0.008018641 0.008320294 0.008492413 0.008753323 0.009104294 0.009209472 0.009604405 0.009920115 0.010140676 0.010897704 0.011216279 0.011317395 0.011566522 0.011904845 0.012179927 0.012522380 0.012726735 0.012785202 0.012902150 0.012967479 0.013212463 0.013656961 0.013931193 0.014118859 0.014714795 0.015316796 0.015414274 0.015544042 0.015923241 0.016031254 0.016463220 0.016499285 0.017523222 0.017878997 0.018828707 0.019161536 0.019174236 0.019382271 0.019415253 0.020132265 0.020167473 0.020532485 0.021049706 0.021492400 0.021640115 0.022540309 0.022766365 0.023035731 0.023223484 0.023334695 0.023445157 0.023461556 0.023763577 0.024418007 0.024419696 0.024556949 0.024736114 0.025091367 0.026329491 0.027142691 0.027372524 0.027892195 0.028083580 0.028417717 0.028698587 0.028860803 0.028969304 0.029061695 0.029500153 0.029689630 0.029853095 0.030289090 0.030574747 0.030614504 0.030713631 0.030896627 0.031035773 0.031121751 0.031285242 0.031893273 0.033936575 0.034127118 0.034705930 0.035215943 0.036070585 0.036340904 0.037456304 0.038028210 0.038198568 0.038322708 0.038444505 0.038500685 0.038685002 0.038911705 0.039025413 0.039158424 0.039263826 0.039672027 0.039847351 0.040308342 0.040316479 0.040533450 0.040758796 0.041064500 0.041816518 0.042004939 0.043389546 0.043447931 0.043771044 0.043885029 0.044743670 0.046908284 0.047075567 0.047833349 0.048038758 0.048557455 0.048783172 0.048869054 0.050573591 0.051117721 0.051490446 0.052295898 0.052712088 0.052853225 0.053415026 0.053441531 0.053509675 0.055536476 0.055799879 0.055829611 0.056208406 0.056885334 0.057110750 0.057378408 0.059499585 0.059723077 0.060969566 0.062720612 0.063001241 0.063172736 0.064143254 0.064483329 0.064659253 0.064857233 0.065002582 0.065364994 0.066258992 0.066367212 0.066664041 0.067328574 0.068502467 0.068895520 0.070463517 0.071299983 0.071781972 0.072094268 0.072476041 0.072669253 0.073962506 0.075848962 0.077468998 0.077585089 0.077890418 0.078233209 0.078465613 0.078572157 0.078746300 0.078926744 0.079676410 0.080101387 0.080487236 0.080805837 0.080903940 0.081168259 0.081343922 0.082184036 0.083225750 0.083281538 0.083395056 0.083954885 0.084030515 0.084450488 0.084741756 0.085151178 0.085339805 0.085815265 0.086293008 0.086787640 0.088273864 0.089180585 0.089610010 0.091624185 0.092007109 0.092399088 0.093279650 0.094223252 0.094945341 0.098566637 0.104637312 0.104764648 0.105368639 0.105546510 0.106223981 0.106897685 0.107688758 0.108308209 0.109385727 0.109514614 0.109899655 0.109985318 0.110970237 0.112438839 0.113101228 0.114643851 0.115407982 0.302514712 0.346486517 0.346594155 0.347141302 0.349390324 0.352705530 0.354012975 0.365045037 0.368563131 0.369424228 0.370030556 0.371315910 0.374652428 0.376497908 0.376919624 0.377576395 0.378441547 0.379156170 0.384810390 0.385042889 0.385767077 0.385804667 0.386209106 0.387281284 0.387765105 0.387941602 0.388654489 0.389462513 0.389595129 0.389818810 0.390121596 0.391229808 0.391416181 0.391429236 0.393031677 0.393643200 0.393998879 0.394912019 0.395246032 0.395669871 0.395916671 0.396373054 0.396924890 0.399731076 0.400054814 0.400228781 0.401478748 0.471294572</array>
            </module>
         </module>
      </module>
   </module>
</module>
